Sample records for factor silicon cantilever

  1. MEMS-based silicon cantilevers with integrated electrothermal heaters for airborne ultrafine particle sensing

    NASA Astrophysics Data System (ADS)

    Wasisto, Hutomo Suryo; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    The development of low-cost and low-power MEMS-based cantilever sensors for possible application in hand-held airborne ultrafine particle monitors is described in this work. The proposed resonant sensors are realized by silicon bulk micromachining technology with electrothermal excitation, piezoresistive frequency readout, and electrostatic particle collection elements integrated and constructed in the same sensor fabrication process step of boron diffusion. Built-in heating resistor and full Wheatstone bridge are set close to the cantilever clamp end for effective excitation and sensing, respectively, of beam deflection. Meanwhile, the particle collection electrode is located at the cantilever free end. A 300 μm-thick, phosphorus-doped silicon bulk wafer is used instead of silicon-on-insulator (SOI) as the starting material for the sensors to reduce the fabrication costs. To etch and release the cantilevers from the substrate, inductively coupled plasma (ICP) cryogenic dry etching is utilized. By controlling the etching parameters (e.g., temperature, oxygen content, and duration), cantilever structures with thicknesses down to 10 - 20 μm are yielded. In the sensor characterization, the heating resistor is heated and generating thermal waves which induce thermal expansion and further cause mechanical bending strain in the out-of-plane direction. A resonant frequency of 114.08 +/- 0.04 kHz and a quality factor of 1302 +/- 267 are measured in air for a fabricated rectangular cantilever (500x100x13.5 μm3). Owing to its low power consumption of a few milliwatts, this electrothermal cantilever is suitable for replacing the current external piezoelectric stack actuator in the next generation of the miniaturized cantilever-based nanoparticle detector (CANTOR).

  2. Silicon cantilever functionalization for cellulose-specific chemical force imaging of switchgrass

    DOE PAGES

    Lee, Ida; Evans, Barbara R.; Foston, Marcus B.; ...

    2015-05-08

    A method for direct functionalization of silicon and silicon nitride cantilevers with bifunctional silanes was tested with model surfaces to determine adhesive forces for different hydrogen-bonding chemistries. Application for biomass surface characterization was tested by mapping switchgrass and isolated switchgrass cellulose in topographic and force-volume mode using a cellulose-specific cantilever.

  3. Vertically Integrated MEMS SOI Composite Porous Silicon-Crystalline Silicon Cantilever-Array Sensors: Concept for Continuous Sensing of Explosives and Warfare Agents

    NASA Astrophysics Data System (ADS)

    Stolyarova, Sara; Shemesh, Ariel; Aharon, Oren; Cohen, Omer; Gal, Lior; Eichen, Yoav; Nemirovsky, Yael

    This study focuses on arrays of cantilevers made of crystalline silicon (c-Si), using SOI wafers as the starting material and using bulk micromachining. The arrays are subsequently transformed into composite porous silicon-crystalline silicon cantilevers, using a unique vapor phase process tailored for providing a thin surface layer of porous silicon on one side only. This results in asymmetric cantilever arrays, with one side providing nano-structured porous large surface, which can be further coated with polymers, thus providing additional sensing capabilities and enhanced sensing. The c-Si cantilevers are vertically integrated with a bottom silicon die with electrodes allowing electrostatic actuation. Flip Chip bonding is used for the vertical integration. The readout is provided by a sensitive Capacitance to Digital Converter. The fabrication, processing and characterization results are reported. The reported study is aimed towards achieving miniature cantilever chips with integrated readout for sensing explosives and chemical warfare agents in the field.

  4. Microfabrication of Silicon/Ceramic Hybrid Cantilever for Scanning Probe Microscope and Sensor Applications

    NASA Astrophysics Data System (ADS)

    Wakayama, Takayuki; Kobayashi, Toshinari; Iwata, Nobuya; Tanifuji, Nozomi; Matsuda, Yasuaki; Yamada, Syoji

    2003-12-01

    We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision-machinery-made ceramics replaces silicon pedestal part. The ceramics was recently developed by Sumikin Ceramics and Quarts Co., Ltd. and can be machined precisely with end mill cutting. Many silicon beams are fabricated at once from a wafer using batch fabrication method. Therefore, SPM probes can be fabricated in high productivity and in low cost. These beams are transferred with transfer technique and are bonded on the ceramic pedestal with epoxy glue. We demonstrate here atomic force microscope (AFM) and gas sensor applications of the hybrid structure. In a gas sensor application, the ends of the cantilever are selectively modified with zeolite crystals as a sensitive layer. The bonding strength is enough for each application.

  5. Asymmetric resonance frequency analysis of in-plane electrothermal silicon cantilevers for nanoparticle sensors

    NASA Astrophysics Data System (ADS)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Marks, Markus; Suryo Wasisto, Hutomo; Peiner, Erwin

    2016-10-01

    The asymmetric resonance frequency analysis of silicon cantilevers for a low-cost wearable airborne nanoparticle detector (Cantor) is described in this paper. The cantilevers, which are operated in the fundamental in-plane resonance mode, are used as a mass-sensitive microbalance. They are manufactured out of bulk silicon, containing a full piezoresistive Wheatstone bridge and an integrated thermal heater for reading the measurement output signal and stimulating the in-plane excitation, respectively. To optimize the sensor performance, cantilevers with different cantilever geometries are designed, fabricated and characterized. Besides the resonance frequency, the quality factor (Q) of the resonance curve has a high influence concerning the sensor sensitivity. Because of an asymmetric resonance behaviour, a novel fitting function and method to extract the Q is created, different from that of the simple harmonic oscillator (SHO). For testing the sensor in a long-term frequency analysis, a phase- locked loop (PLL) circuit is employed, yielding a frequency stability of up to 0.753 Hz at an Allan variance of 3.77 × 10-6. This proposed asymmetric resonance frequency analysis method is expected to be further used in the process development of the next-generation Cantor.

  6. Compact cantilever couplers for low-loss fiber coupling to silicon photonic integrated circuits.

    PubMed

    Wood, Michael; Sun, Peng; Reano, Ronald M

    2012-01-02

    We demonstrate coupling from tapered optical fibers to 450 nm by 250 nm silicon strip waveguides using compact cantilever couplers. The couplers consist of silicon inverse width tapers embedded within silicon dioxide cantilevers. Finite difference time domain simulations are used to design the length of the silicon inverse width taper to as short as 6.5 μm for a cantilever width of 2 μm. Modeling of various strip waveguide taper profiles shows reduced coupling losses for a quadratic taper profile. Infrared measurements of fabricated devices demonstrate average coupling losses of 0.62 dB per connection for the quasi-TE mode and 0.50 dB per connection for the quasi-TM mode across the optical telecommunications C band. In the wavelength range from 1477 nm to 1580 nm, coupling losses for both polarizations are less than 1 dB per connection. The compact, broadband, and low-loss coupling scheme enables direct access to photonic integrated circuits on an entire chip surface without the need for dicing or cleaving the chip.

  7. Analysis of asymmetric resonance response of thermally excited silicon micro-cantilevers for mass-sensitive nanoparticle detection

    NASA Astrophysics Data System (ADS)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Suryo Wasisto, Hutomo; Uhde, Erik; Peiner, Erwin

    2017-06-01

    In this paper, the asymmetric resonance frequency (f 0) responses of thermally in-plane excited silicon cantilevers for a pocket-sized, cantilever-based airborne nanoparticle detector (Cantor) are analysed. By measuring the shift of f 0 caused by the deposition of nanoparticles (NPs), the cantilevers are used as a microbalance. The cantilever sensors are low cost manufactured from silicon by bulk-micromachining techniques and contain an integrated p-type heating actuator and a sensing piezoresistive Wheatstone bridge. f 0 is tracked by a homemade phase-locked loop (PPL) for real-time measurements. To optimize the sensor performance, a new cantilever geometry was designed, fabricated and characterized by its frequency responses. The most significant characterisation parameters of our application are f 0 and the quality factor (Q), which have high influences on sensitivity and efficiency of the NP detector. Regarding the asymmetric resonance signal, a novel fitting function based on the Fano resonance replacing the conventionally used function of the simple harmonic oscillator and a method to calculate Q by its fitting parameters were developed for a quantitative evaluation. To obtain a better understanding of the resonance behaviours, we analysed the origin of the asymmetric line shapes. Therefore, we compared the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator. In correspondence to the Fano effect, we could reconstruct the measured resonance curves by coupling two signals with constant amplitude and the expected signal of the cantilever, respectively. Moreover, the phase of the measurement signal can be analysed by this method, which is important to understand the locking process of the PLL circuit. Besides the frequency analysis, experimental results and calibration measurements with different particle types are presented. Using the described analysis method, decent results to optimize a next

  8. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

    PubMed Central

    Contreras, Javier; Costa, Daniel; Pereira, Sonia; Fortunato, Elvira; Martins, Rodrigo; Wierzbicki, Rafal; Heerlein, Holger; Ferreira, Isabel

    2010-01-01

    The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 μm wide by 400 μm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 μm along the lateral dimension of the sensor as well as of less than 3 μm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 μm when detecting the holding structure. PMID:22163648

  9. Fabrication and characterization of an ultrasensitive acousto-optical cantilever

    NASA Astrophysics Data System (ADS)

    Sievilä, P.; Rytkönen, V.-P.; Hahtela, O.; Chekurov, N.; Kauppinen, J.; Tittonen, I.

    2007-05-01

    A cantilever-type silicon device for sensing changes in pressure has been designed, fabricated and characterized. The microfabrication process is based on two-sided etching of silicon-on insulator (SOI) wafers. The rectangular cantilevers are 9.5 µm thick, and cover an area of a few square millimeters. The cantilevers are surrounded by thick and tight frames, since on the three free sides there are only narrow, micrometer sized air gaps between the cantilever and the frame. This design and excellent mechanical properties of single crystal silicon enable sensitive detection of time-dependent gas pressure variations, i.e. acoustic waves. The mechanical properties of the cantilever have been characterized by analyzing its dynamic behavior. The resonance frequency and the mechanical vibrational mode patterns have been determined using finite-element method (FEM) simulations and laser interferometry. These results are found to be in good agreement with each other. Initially this mechanical door-like cantilever was designed to be used in ultra-high sensitivity photoacoustic gas sensing, but it can also be applied quite generally in various kinds of sound wave detection schemes.

  10. Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

    NASA Astrophysics Data System (ADS)

    Buettel, G.; Joppich, J.; Hartmann, U.

    2017-12-01

    Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

  11. Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications

    NASA Astrophysics Data System (ADS)

    Sökmen, Ü.; Stranz, A.; Waag, A.; Ababneh, A.; Seidel, H.; Schmid, U.; Peiner, E.

    2010-06-01

    We report on a micro-machined resonator for mass sensing applications which is based on a silicon cantilever excited with a sputter-deposited piezoelectric aluminium nitride (AlN) thin film actuator. An inductively coupled plasma (ICP) cryogenic dry etching process was applied for the micro-machining of the silicon substrate. A shift in resonance frequency was observed, which was proportional to a mass deposited in an e-beam evaporation process on top. We had a mass sensing limit of 5.2 ng. The measurements from the cantilevers of the two arrays revealed a quality factor of 155-298 and a mass sensitivity of 120.34 ng Hz-1 for the first array, and a quality factor of 130-137 and a mass sensitivity of 104.38 ng Hz-1 for the second array. Furthermore, we managed to fabricate silicon cantilevers, which can be improved for the detection in the picogram range due to a reduction of the geometrical dimensions.

  12. Piezoresistive Cantilever Performance—Part I: Analytical Model for Sensitivity

    PubMed Central

    Park, Sung-Jin; Doll, Joseph C.; Pruitt, Beth L.

    2010-01-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors. PMID:20336183

  13. Piezoresistive Cantilever Performance-Part I: Analytical Model for Sensitivity.

    PubMed

    Park, Sung-Jin; Doll, Joseph C; Pruitt, Beth L

    2010-02-01

    An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.

  14. Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticle mass

    NASA Astrophysics Data System (ADS)

    Wasisto, H. S.; Merzsch, S.; Stranz, A.; Waag, A.; Uhde, E.; Kirsch, I.; Salthammer, T.; Peiner, E.

    2011-06-01

    A silicon cantilever with slender geometry based Micro Electro Mechanical System (MEMS) for nanoparticles mass detection is presented in this work. The cantilever is actuated using a piezoactuator at the bottom end of the cantilever supporting frame. The oscillation of the microcantilever is detected by a self-sensing method utilizing an integrated full Wheatstone bridge as a piezoresistive strain gauge for signal read out. Fabricated piezoresistive cantilevers of 1.5 mm long, 30 μm wide and 25 μm thick have been employed. This self-sensing cantilever is used due to its simplicity, portability, high-sensitivity and low-cost batch microfabrication. In order to investigate air pollution sampling, a nanoparticles collection test of the piezoresistive cantilever sensor is performed in a sealed glass chamber with a stable carbon aerosol inside. The function principle of cantilever sensor is based on detecting the resonance frequency shift that is directly induced by an additional carbon nanoparticles mass deposited on it. The deposition of particles is enhanced by an electrostatic field. The frequency measurement is performed off-line under normal atmospheric conditions, before and after carbon nanoparticles sampling. The calculated equivalent mass-induced resonance frequency shift of the experiment is measured to be 11.78 +/- 0.01 ng and a mass sensitivity of 8.33 Hz/ng is obtained. The proposed sensor exhibits an effective mass of 2.63 μg, a resonance frequency of 43.92 kHz, and a quality factor of 1230.68 +/- 78.67. These results and analysis indicate that the proposed self-sensing piezoresistive silicon cantilever can offer the necessary potential for a mobile nanoparticles monitor.

  15. Fabrication of Cantilever-Bump Type Si Probe Card

    NASA Astrophysics Data System (ADS)

    Park, Jeong-Yong; Lee, Dong-Seok; Kim, Dong-Kwon; Lee, Jong-Hyun

    2000-12-01

    Probe card is most important part in the test system which selects the good or bad chip of integrated circuit (IC) chips. Silicon vertical probe card is able to test multiple semiconductor chips simultaneously. We presented cantilever-bump type vertical probe card. It was fabricated by dry etching using RIE(reactive ion etching) technique and porous silicon micromachining using silicon direct bonded (SDB) wafer. Cantilevers and bumps were fabricated by isotropic etching using RIE@. 3-dimensional structures were formed by porous silicon micromachining technique using SDB wafer. Contact resistance of fabricated probe card was less than 2 Ω and its life time was more than 200,000 turns. The process used in this work is very simple and reproducible, which has good controllability in the tip dimension and spacing. It is expected that the fabricated probe card can reduce testing time, can promote productivity and enables burn-in test.

  16. Optically-controlled extinction ratio and Q-factor tunable silicon microring resonators based on optical forces

    NASA Astrophysics Data System (ADS)

    Long, Yun; Wang, Jian

    2014-06-01

    Tunability is a desirable property of microring resonators to facilitate superior performance. Using light to control light, we present an alternative simple approach to tuning the extinction ratio (ER) and Q-factor of silicon microring resonators based on optical forces. We design an opto-mechanical tunable silicon microring resonator consisting of an add-drop microring resonator and a control-light-carrying waveguide (``controlling'' waveguide). One of the two bus waveguides of the microring resonator is a deformable nanostring put in parallel with the ``controlling'' waveguide. The tuning mechanism relies on the optical force induced deflection of suspended nanostring, leading to the change of coupling coefficient of microring and resultant tuning of ER and Q-factor. Two possible geometries, i.e. double-clamped nanostring and cantilever nanostring, are studied in detail for comparison. The obtained results imply a favorable structure with the microring positioned at the end of the cantilever nanostring. It features a wide tuning range of ER from 5.6 to 39.9 dB and Q-factor from 309 to 639 as changing the control power from 0 to 1.4 mW.

  17. Electrothermal piezoresistive cantilever resonators for personal measurements of nanoparticles in workplace exposure

    NASA Astrophysics Data System (ADS)

    Wasisto, Hutomo Suryo; Wu, Wenze; Uhde, Erik; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Low-cost and low-power piezoresistive cantilever resonators with integrated electrothermal heaters are developed to support the sensing module enhancement of the second generation of handheld cantilever-based airborne nanoparticle (NP) detector (CANTOR-2). These sensors are used for direct-reading of exposure to carbon engineered nanoparticles (ENPs) at indoor workplaces. The cantilever structures having various shapes of free ends are created using silicon bulk micromachining technologies (i.e, rectangular, hammer-head, triangular, and U-shaped cantilevers). For a complete wearable CANTOR-2, all components of the proposed detector can be grouped into two main units depending on their packaging placements (i.e., the NP sampler head and the electronics mounted in a handy-format housing). In the NP sampler head, a miniaturized electrophoretic aerosol sampler and a resonant silicon cantilever mass sensor are employed to collect the ENPs from the air stream to the cantilever surfaces and measuring their mass concentration, respectively. After calibration, the detected ENP mass concentrations of CANTOR-2 show a standard deviation from fast mobility particle sizer (FMPS, TSI 3091) of 8-14%.

  18. ‘Living cantilever arrays’ for characterization of mass of single live cells in fluids†

    PubMed Central

    Park, Kidong; Jang, Jaesung; Irimia, Daniel; Sturgis, Jennifer; Lee, James; Robinson, J. Paul; Toner, Mehmet; Bashir, Rashid

    2013-01-01

    The size of a cell is a fundamental physiological property and is closely regulated by various environmental and genetic factors. Optical or confocal microscopy can be used to measure the dimensions of adherent cells, and Coulter counter or flow cytometry (forward scattering light intensity) can be used to estimate the volume of single cells in a flow. Although these methods could be used to obtain the mass of single live cells, no method suitable for directly measuring the mass of single adherent cells without detaching them from the surface is currently available. We report the design, fabrication, and testing of ‘living cantilever arrays’, an approach to measure the mass of single adherent live cells in fluid using silicon cantilever mass sensor. HeLa cells were injected into microfluidic channels with a linear array of functionalized silicon cantilevers and the cells were subsequently captured on the cantilevers with positive dielectrophoresis. The captured cells were then cultured on the cantilevers in a microfluidic environment and the resonant frequencies of the cantilevers were measured. The mass of a single HeLa cell was extracted from the resonance frequency shift of the cantilever and was found to be close to the mass value calculated from the cell density from the literature and the cell volume obtained from confocal microscopy. This approach can provide a new method for mass measurement of a single adherent cell in its physiological condition in a non-invasive manner, as well as optical observations of the same cell. We believe this technology would be very valuable for single cell time-course studies of adherent live cells. PMID:18584076

  19. SPM local oxidation nanolithography with active control of cantilever dynamics

    NASA Astrophysics Data System (ADS)

    Nishimura, S.; Takemura, Y.; Shirakashi, J.

    2007-04-01

    Local oxidation nanolithography using scanning probe microscope (SPM) has enabled us to fabricate nanometer-scale oxide wires on material surfaces. Here, we study tapping mode SPM local oxidation experiments for silicon by controlling the dynamic properties of the cantilever. Dependence of feature size of fabricated oxide wires on the amplitude of the cantilever was precisely investigated. The quality factor (Q) was fixed at a natural value of ~500. By enhancing the amplitude of the cantilever, both width and height of fabricated Si oxide wires were decreased. With the variation of the amplitude of the cantilever from 0.5 V to 3.0 V (DC voltage = 22.5 V, scanning speed = 20 nm/s), the feature size of Si oxide wires was well controlled, ranging from 40 nm to 18 nm in width and 2.3 nm to 0.6 nm in height. Standard deviation of width on Si oxide wires formed by tapping mode SPM is around 2.0 nm, which is smaller than that of contact mode Si oxide wires. Furthermore, the variation of the oscillation amplitude of the cantilever does not affect the size uniformity of the wires. These results imply that the SPM local oxidation nanolithography with active control of cantilever dynamics is a useful technique for producing higher controllability on the nanometer-scale fabrication of Si oxide wires.

  20. Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

    PubMed Central

    Zakerin, Marjan; Novak, Antonin; Toda, Masaya; Emery, Yves; Natalio, Filipe; Butt, Hans-Jürgen; Berger, Rüdiger

    2017-01-01

    In this paper, we apply a digital holographic microscope (DHM) in conjunction with stroboscopic acquisition synchronization. Here, the temperature-dependent decrease of the first resonance frequency (S1(T)) and Young’s elastic modulus (E1(T)) of silicon micromechanical cantilever sensors (MCSs) are measured. To perform these measurements, the MCSs are uniformly heated from T0 = 298 K to T = 450 K while being externally actuated with a piezo-actuator in a certain frequency range close to their first resonance frequencies. At each temperature, the DHM records the time-sequence of the 3D topographies for the given frequency range. Such holographic data allow for the extracting of the out-of-plane vibrations at any relevant area of the MCSs. Next, the Bode and Nyquist diagrams are used to determine the resonant frequencies with a precision of 0.1 Hz. Our results show that the decrease of resonance frequency is a direct consequence of the reduction of the silicon elastic modulus upon heating. The measured temperature dependence of the Young’s modulus is in very good accordance with the previously-reported values, validating the reliability and applicability of this method for micromechanical sensing applications. PMID:28545236

  1. Biosensors based on cantilevers.

    PubMed

    Alvarez, Mar; Carrascosa, Laura G; Zinoviev, Kiril; Plaza, Jose A; Lechuga, Laura M

    2009-01-01

    Microcantilevers based-biosensors are a new label-free technique that allows the direct detection of biomolecular interactions in a label-less way and with great accuracy by translating the biointeraction into a nanomechanical motion. Low cost and reliable standard silicon technologies are widely used for the fabrication of cantilevers with well-controlled mechanical properties. Over the last years, the number of applications of these sensors has shown a fast growth in diverse fields, such as genomic or proteomic, because of the biosensor flexibility, the low sample consumption, and the non-pretreated samples required. In this chapter, we report a dedicated design and a fabrication process of highly sensitive microcantilever silicon sensors. We will describe as well an application of the device in the environmental field showing the immunodetection of an organic toxic pesticide as an example. The cantilever biofunctionalization process and the subsequent pesticide determination are detected in real time by monitoring the nanometer-scale bending of the microcantilever due to a differential surface stress generated between both surfaces of the device.

  2. Piezoresistive Cantilever Performance—Part II: Optimization

    PubMed Central

    Park, Sung-Jin; Doll, Joseph C.; Rastegar, Ali J.; Pruitt, Beth L.

    2010-01-01

    Piezoresistive silicon cantilevers fabricated by ion implantation are frequently used for force, displacement, and chemical sensors due to their low cost and electronic readout. However, the design of piezoresistive cantilevers is not a straightforward problem due to coupling between the design parameters, constraints, process conditions, and performance. We systematically analyzed the effect of design and process parameters on force resolution and then developed an optimization approach to improve force resolution while satisfying various design constraints using simulation results. The combined simulation and optimization approach is extensible to other doping methods beyond ion implantation in principle. The optimization results were validated by fabricating cantilevers with the optimized conditions and characterizing their performance. The measurement results demonstrate that the analytical model accurately predicts force and displacement resolution, and sensitivity and noise tradeoff in optimal cantilever performance. We also performed a comparison between our optimization technique and existing models and demonstrated eight times improvement in force resolution over simplified models. PMID:20333323

  3. A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

    PubMed Central

    Wang, Yu-Hsiang; Lee, Chia-Yen; Chiang, Che-Ming

    2007-01-01

    This paper presents a micro-scale air flow sensor based on a free-standing cantilever structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitride layer to form a piezoresistor, and the resulting structure is then etched to create a freestanding micro-cantilever. When an air flow passes over the surface of the cantilever beam, the beam deflects in the downward direction, resulting in a small variation in the resistance of the piezoelectric layer. The air flow velocity is determined by measuring the change in resistance using an external LCR meter. The experimental results indicate that the flow sensor has a high sensitivity (0.0284 Ω/ms-1), a high velocity measurement limit (45 ms-1) and a rapid response time (0.53 s). PMID:28903233

  4. Note: Improved calibration of atomic force microscope cantilevers using multiple reference cantilevers.

    PubMed

    Sader, John E; Friend, James R

    2015-05-01

    Overall precision of the simplified calibration method in J. E. Sader et al., Rev. Sci. Instrum. 83, 103705 (2012), Sec. III D, is dominated by the spring constant of the reference cantilever. The question arises: How does one take measurements from multiple reference cantilevers, and combine these results, to improve uncertainty of the reference cantilever's spring constant and hence the overall precision of the method? This question is addressed in this note. Its answer enables manufacturers to specify of a single set of data for the spring constant, resonant frequency, and quality factor, from measurements on multiple reference cantilevers. With this data set, users can trivially calibrate cantilevers of the same type.

  5. Shielded piezoresistive cantilever probes for nanoscale topography and electrical imaging

    NASA Astrophysics Data System (ADS)

    Yang, Yongliang; Ma, Eric Yue; Cui, Yong-Tao; Haemmerli, Alexandre; Lai, Keji; Kundhikanjana, Worasom; Harjee, Nahid; Pruitt, Beth L.; Kelly, Michael; Shen, Zhi-Xun

    2014-04-01

    This paper presents the design and fabrication of piezoresistive cantilever probes for microwave impedance microscopy (MIM) to enable simultaneous topographic and electrical imaging. Plasma enhanced chemical vapor deposited Si3N4 cantilevers with a shielded center conductor line and nanoscale conductive tip apex are batch fabricated on silicon-on-insulator wafers. Doped silicon piezoresistors are integrated at the root of the cantilevers to sense their deformation. The piezoresistive sensitivity is 2 nm for a bandwidth of 10 kHz, enabling topographical imaging with reasonable speed. The aluminum center conductor has a low resistance (less than 5 Ω) and small capacitance (˜1.7 pF) to ground; these parameters are critical for high sensitivity MIM imaging. High quality piezoresistive topography and MIM images are simultaneously obtained with the fabricated probes at ambient and cryogenic temperatures. These new piezoresistive probes remarkably broaden the horizon of MIM for scientific applications by operating with an integrated feedback mechanism at low temperature and for photosensitive samples.

  6. Biomechanical factors associated with mandibular cantilevers: analysis with three-dimensional finite element models.

    PubMed

    Gonda, Tomoya; Yasuda, Daiisa; Ikebe, Kazunori; Maeda, Yoshinobu

    2014-01-01

    Although the risks of using a cantilever to treat missing teeth have been described, the mechanisms remain unclear. This study aimed to reveal these mechanisms from a biomechanical perspective. The effects of various implant sites, number of implants, and superstructural connections on stress distribution in the marginal bone were analyzed with three-dimensional finite element models based on mandibular computed tomography data. Forces from the masseter, temporalis, and internal pterygoid were applied as vectors. Two three-dimensional finite element models were created with the edentulous mandible showing severe and relatively modest residual ridge resorption. Cantilevers of the premolar and molar were simulated in the superstructures in the models. The following conditions were also included as factors in the models to investigate changes: poor bone quality, shortened dental arch, posterior occlusion, lateral occlusion, double force of the masseter, and short implant. Multiple linear regression analysis with a forced-entry method was performed with stress values as the objective variable and the factors as the explanatory variable. When bone mass was high, stress around the implant caused by differences in implantation sites was reduced. When bone mass was low, the presence of a cantilever was a possible risk factor. The stress around the implant increased significantly if bone quality was poor or if increased force (eg, bruxism) was applied. The addition of a cantilever to the superstructure increased stress around implants. When large muscle forces were applied to a superstructure with cantilevers or if bone quality was poor, stress around the implants increased.

  7. Note: Calibration of atomic force microscope cantilevers using only their resonant frequency and quality factor

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Sader, John E., E-mail: jsader@unimelb.edu.au; Friend, James R.; Department of Mechanical and Aerospace Engineering, University of California-San Diego, La Jolla, California 92122

    2014-11-15

    A simplified method for calibrating atomic force microscope cantilevers was recently proposed by Sader et al. [Rev. Sci. Instrum. 83, 103705 (2012); Sec. III D] that relies solely on the resonant frequency and quality factor of the cantilever in fluid (typically air). This method eliminates the need to measure the hydrodynamic function of the cantilever, which can be time consuming given the wide range of cantilevers now available. Using laser Doppler vibrometry, we rigorously assess the accuracy of this method for a series of commercially available cantilevers and explore its performance under non-ideal conditions. This shows that the simplified methodmore » is highly accurate and can be easily implemented to perform fast, robust, and non-invasive spring constant calibration.« less

  8. A closed-loop system for frequency tracking of piezoresistive cantilever sensors

    NASA Astrophysics Data System (ADS)

    Wasisto, Hutomo Suryo; Zhang, Qing; Merzsch, Stephan; Waag, Andreas; Peiner, Erwin

    2013-05-01

    A closed loop circuit capable of tracking resonant frequencies for MEMS-based piezoresistive cantilever resonators is developed in this work. The proposed closed-loop system is mainly based on a phase locked loop (PLL) circuit. In order to lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator (VCO) is locked to the phase of the input reference signal of the cantilever sensor. In addition to the PLL component, an instrumentation amplifier and an active low pass filter (LPF) are connected to the system for gaining the amplitude and reducing the noise of the cantilever output signals. The LPF can transform a rectangular signal into a sinusoidal signal with voltage amplitudes ranging from 5 to 10 V which are sufficient for a piezoactuator input (i.e., maintaining a large output signal of the cantilever sensor). To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is utilized for actuating the cantilever into resonance. Implementation of this closed loop system is used to track the resonant frequency of a silicon cantilever-based sensor resonating at 9.4 kHz under a cross-sensitivity test of ambient temperature. The changes of the resonant frequency are interpreted using a frequency counter connected to the system. From the experimental results, the temperature sensitivity and coefficient of the employed sensor are 0.3 Hz/°C and 32.8 ppm/°C, respectively. The frequency stability of the system can reach up to 0.08 Hz. The development of this system will enable real-time nanoparticle monitoring systems and provide a miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors.

  9. SOI-silicon as structural layer for NEMS applications

    NASA Astrophysics Data System (ADS)

    Villarroya, Maria; Figueras, Eduard; Perez-Murano, Francesc; Campabadal, Francesca; Esteve, Jaume; Barniol, Nuria

    2003-04-01

    The objective of this paper is to present the compatibilization between a standard CMOS on bulk silicon process and the fabrication of nanoelectromechanical systems using Silicon On Insulator (SOI) wafers as substrate. This compatibilization is required as first step to fabricate a very high sensitive mass sensor based on a resonant cantilever with nanometer dimensions using the crystal silicon COI layer as the structural layer. The cantilever is driven electrostatically to its resonance frequency by an electrode placed parallel to the cantilever. A capacitive readout is performed. To achieve very high resolution, very small dimensions of the cantilever (nanometer range) are needed. For this reason, the control and excitation circuitry has to be integrated on the same substrate than the cantilever. Prior to the development of this sensor, it is necessary to develop a substrate able to be used first to integrate a standard CMOS circuit and afterwards to fabricate the nano-resonator. Starting from a SOI wafer and using very simple processes, the SOI silicon layer is removed, except from the areas in which nano-structures will be fabricated; obtaining a silicon substrate with islands with a SOI structure. The CMOS circuitry will be integrated on the bulk silicon region, while the remainder SOI region will be used for the nanoresonator. The silicon oxide of this SOI region is used as insulator; and as sacrificial layer, etched to release the cantilever from the substrate. To assure the cover of the different CMOS layers over the step of the islands, it is essential to avoid very sharp steps.

  10. Investigation of polymer derived ceramics cantilevers for application of high speed atomic force microscopy

    NASA Astrophysics Data System (ADS)

    Wu, Chia-Yun

    High speed Atomic Force Microscopy (AFM) has a wide variety of applications ranging from nanomanufacturing to biophysics. In order to have higher scanning speed of certain AFM modes, high resonant frequency cantilevers are needed; therefore, the goal of this research is to investigate using polymer derived ceramics for possible applications in making high resonant frequency AFM cantilevers using complex cross sections. The polymer derived ceramic that will be studied, is silicon carbide. Polymer derived ceramics offer a potentially more economic fabrication approach for MEMS due to their relatively low processing temperatures and ease of complex shape design. Photolithography was used to make the desired cantilever shapes with micron scale size followed by a wet etching process to release the cantilevers from the substrates. The whole manufacturing process we use borrow well-developed techniques from the semiconducting industry, and as such this project also could offer the opportunity to reduce the fabrication cost of AFM cantilevers and MEMS in general. The characteristics of silicon carbide made from the precursor polymer, SMP-10 (Starfire Systems), were studied. In order to produce high qualities of silicon carbide cantilevers, where the major concern is defects, proper process parameters needed to be determined. Films of polymer derived ceramics often have defects due to shrinkage during the conversion process. Thus control of defects was a central issue in this study. A second, related concern was preventing oxidation; the polymer derived ceramics we chose is easily oxidized during processing. Establishing an environment without oxygen in the whole process was a significant challenge in the project. The optimization of the parameters for using photolithography and wet etching process was the final and central goal of the project; well established techniques used in microfabrication were modified for use in making the cantilever in the project. The techniques

  11. Note: Improved calibration of atomic force microscope cantilevers using multiple reference cantilevers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Sader, John E., E-mail: jsader@unimelb.edu.au; Friend, James R.

    2015-05-15

    Overall precision of the simplified calibration method in J. E. Sader et al., Rev. Sci. Instrum. 83, 103705 (2012), Sec. III D, is dominated by the spring constant of the reference cantilever. The question arises: How does one take measurements from multiple reference cantilevers, and combine these results, to improve uncertainty of the reference cantilever’s spring constant and hence the overall precision of the method? This question is addressed in this note. Its answer enables manufacturers to specify of a single set of data for the spring constant, resonant frequency, and quality factor, from measurements on multiple reference cantilevers. Withmore » this data set, users can trivially calibrate cantilevers of the same type.« less

  12. Position and mode dependent optical detection back-action in cantilever beam resonators

    NASA Astrophysics Data System (ADS)

    Larsen, T.; Schmid, S.; Dohn, S.; Sader, J. E.; Boisen, A.; Villanueva, L. G.

    2017-03-01

    Optical detection back-action in cantilever resonant or static detection presents a challenge when striving for state-of-the-art performance. The origin and possible routes for minimizing optical back-action have received little attention in literature. Here, we investigate the position and mode dependent optical back-action on cantilever beam resonators. A high power heating laser (100 µW) is scanned across a silicon nitride cantilever while its effect on the first three resonance modes is detected via a low-power readout laser (1 µW) positioned at the cantilever tip. We find that the measured effect of back-action is not only dependent on position but also the shape of the resonance mode. Relevant silicon nitride material parameters are extracted by fitting finite element (FE) simulations to the temperature-dependent frequency response of the first three modes. In a second round of simulations, using the extracted parameters, we successfully fit the FEM results with the measured mode and position dependent back-action. From the simulations, we can conclude that the observed frequency tuning is due to temperature induced changes in stress. Effects of changes in material properties and dimensions are negligible. Finally, different routes for minimizing the effect of this optical detection back-action are described, allowing further improvements of cantilever-based sensing in general.

  13. A Latin-cross-shaped integrated resonant cantilever with second torsion-mode resonance for ultra-resoluble bio-mass sensing

    NASA Astrophysics Data System (ADS)

    Xia, Xiaoyuan; Zhang, Zhixiang; Li, Xinxin

    2008-03-01

    Second torsion-mode resonance is proposed for microcantilever biosensors for ultra-high mass-weighing sensitivity and resolution. By increasing both the resonant frequency and Q-factor, the higher mode torsional resonance is favorable for improving the mass-sensing performance. For the first time, a Latin-cross-shaped second-mode resonant cantilever is constructed and optimally designed for both signal-readout and resonance-exciting elements. The cantilever sensor is fabricated by using silicon micromachining techniques. The transverse piezoresistive sensing element and the specific-shaped resonance-exciting loop are successfully integrated in the cantilever. Alpha-fetoprotein (AFP) antibody-antigen specific binding is implemented for the sensing experiment. The proposed cantilever sensor is designed with significantly superior sensitivity to the previously reported first torsion-mode one. After analysis with an Allan variance algorithm, which can be easily embedded in the sensing system, the Latin-cross-shaped second torsion-mode resonant cantilever is evaluated with ultra-high mass resolution. Therefore, the high-performance integrated micro-sensor is promising for on-the-spot bio-molecule detection.

  14. Design optimization of piezoresistive cantilevers for force sensing in air and water

    PubMed Central

    Doll, Joseph C.; Park, Sung-Jin; Pruitt, Beth L.

    2009-01-01

    Piezoresistive cantilevers fabricated from doped silicon or metal films are commonly used for force, topography, and chemical sensing at the micro- and macroscales. Proper design is required to optimize the achievable resolution by maximizing sensitivity while simultaneously minimizing the integrated noise over the bandwidth of interest. Existing analytical design methods are insufficient for modeling complex dopant profiles, design constraints, and nonlinear phenomena such as damping in fluid. Here we present an optimization method based on an analytical piezoresistive cantilever model. We use an existing iterative optimizer to minimimize a performance goal, such as minimum detectable force. The design tool is available as open source software. Optimal cantilever design and performance are found to strongly depend on the measurement bandwidth and the constraints applied. We discuss results for silicon piezoresistors fabricated by epitaxy and diffusion, but the method can be applied to any dopant profile or material which can be modeled in a similar fashion or extended to other microelectromechanical systems. PMID:19865512

  15. Properties of piezoresistive silicon nano-scale cantilevers with applications to BioNEMS

    NASA Astrophysics Data System (ADS)

    Arlett, Jessica Lynn

    Over the last decade a great deal of interest has been raised in applications of Microelectromechanical Sensors [MEMS] for the detection of biological molecules and to the study of their forces of interaction. Experiments in these areas have included Force Spectroscopy (Chemical Force Microscopy), MEMS patch clamp technology, and surface stress sensors. All of these technologies suffer from limitations on temporal response and involve devices with active surface areas that are large compared to molecular dimensions. Biofunctionalized nanoelectromechanical systems (BioNEMS) have the potential to overcome both of these hurdles, offering important new prospects for single-molecule force assays that are amenable to large scale integration. Results are presented here on the characterization of piezoresistive silicon cantilevers with applications to BioNEMS devices. The cantilevers were characterized by studying their response in gaseous ambients under a number of drive conditions including magnetic, piezoelectric, and thermal actuation, in addition to passive detection of the thermomechanical response. The measurements were performed at liquid helium temperature, at room temperature, and over a range of pressures (atmospheric pressure to 30mT). Theoretical studies have been performed on the response of these devices to Brownian fluctuations in fluid, on the feasibility of these devices as surface stress sensors, and on improvements in device design as compared to piezoresistive surface stress sensors currently discussed in the literature. The devices were encapsulated in microfluidics and measurements were performed to show the noise floor in fluid. The piezoresistive response of the device in fluid was shown through the use of pulsatory fluidic drive. As a proof of concept, biodetection experiments are presented for biotin labeled beads. The biofunctionalization for the latter experiment was performed entirely within the microfluidics. A discussion of how these

  16. Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Acheli, A., E-mail: aacheli@cdta.dz; Serhane, R.

    This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken intomore » account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.« less

  17. SU-8 hollow cantilevers for AFM cell adhesion studies

    NASA Astrophysics Data System (ADS)

    Martinez, Vincent; Behr, Pascal; Drechsler, Ute; Polesel-Maris, Jérôme; Potthoff, Eva; Vörös, Janos; Zambelli, Tomaso

    2016-05-01

    A novel fabrication method was established to produce flexible, transparent, and robust tipless hollow atomic force microscopy (AFM) cantilevers made entirely from SU-8. Channels of 3 μm thickness and several millimeters length were integrated into 12 μm thick and 40 μm wide cantilevers. Connected to a pressure controller, the devices showed high sealing performance with no leakage up to 6 bars. Changing the cantilever lengths from 100 μm to 500 μm among the same wafer allowed the targeting of various spring constants ranging from 0.5 to 80 N m-1 within a single fabrication run. These hollow polymeric AFM cantilevers were operated in the optical beam deflection configuration. To demonstrate the performance of the device, single-cell force spectroscopy experiments were performed with a single probe detaching in a serial protocol more than 100 Saccharomyces cerevisiae yeast cells from plain glass and glass coated with polydopamine while measuring adhesion forces in the sub-nanoNewton range. SU-8 now offers a new alternative to conventional silicon-based hollow cantilevers with more flexibility in terms of complex geometric design and surface chemistry modification.

  18. The stress intensity factor for the double cantilever beam

    NASA Technical Reports Server (NTRS)

    Fichter, W. B.

    1983-01-01

    Fourier transforms and the Wiener-Hopf technique are used in conjunction with plane elastostatics to examine the singular crack tip stress field in the double cantilever beam (DCB) specimen. In place of the Dirac delta function, a family of functions which duplicates the important features of the concentrated forces without introducing unmanageable mathematical complexities is used as a loading function. With terms of order h-squared/a-squared retained in the series expansion, the dimensionless stress intensity factor is found to be K (h to the 1/2)/P = 12 to the 1/2 (a/h + 0.6728 + 0.0377 h-squared/a-squared), in which P is the magnitude of the concentrated forces per unit thickness, a is the distance from the crack tip to the points of load application, and h is the height of each cantilever beam. The result is similar to that obtained by Gross and Srawley by fitting a line to discrete results from their boundary collocation analysis.

  19. Silicon Integrated Cavity Optomechanical Transducer

    NASA Astrophysics Data System (ADS)

    Zou, Jie; Miao, Houxun; Michels, Thomas; Liu, Yuxiang; Srinivasan, Kartik; Aksyuk, Vladimir

    2013-03-01

    Cavity optomechanics enables measurements of mechanical motion at the fundamental limits of precision imposed by quantum mechanics. However, the need to align and couple devices to off-chip optical components hinders development, miniaturization and broader application of ultrahigh sensitivity chip-scale optomechanical transducers. Here we demonstrate a fully integrated and optical fiber pigtailed optomechanical transducer with a high Q silicon micro-disk cavity near-field coupled to a nanoscale cantilever. We detect the motion of the cantilever by measuring the resonant frequency shift of the whispering gallery mode of the micro-disk. The sensitivity near the standard quantum limit can be reached with sub-uW optical power. Our on-chip approach combines compactness and stability with great design flexibility: the geometry of the micro-disk and cantilever can be tailored to optimize the mechanical/optical Q factors and tune the mechanical frequency over two orders of magnitudes. Electrical transduction in addition to optical transduction was also demonstrated and both can be used to effectively cool the cantilever. Moreover, cantilevers with sharp tips overhanging the chip edge were fabricated to potentially allow the mechanical cantilever to be coupled to a wide range of off-chip systems, such as spins, DNA, nanostructures and atoms on clean surfaces.

  20. Compliant cantilevered micromold

    DOEpatents

    Morales, Alfredo Martin [Pleasanton, CA; Domeier, Linda A [Danville, CA; Gonzales, Marcela G [Seattle, WA; Keifer, Patrick N [Livermore, CA; Garino, Terry Joseph [Albuquerque, NM

    2006-08-15

    A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.

  1. Increased imaging speed and force sensitivity for bio-applications with small cantilevers using a conventional AFM setup

    PubMed Central

    Leitner, Michael; Fantner, Georg E.; Fantner, Ernest J.; Ivanova, Katerina; Ivanov, Tzvetan; Rangelow, Ivo; Ebner, Andreas; Rangl, Martina; Tang, Jilin; Hinterdorfer, Peter

    2012-01-01

    In this study, we demonstrate the increased performance in speed and sensitivity achieved by the use of small AFM cantilevers on a standard AFM system. For this, small rectangular silicon oxynitride cantilevers were utilized to arrive at faster atomic force microscopy (AFM) imaging times and more sensitive molecular recognition force spectroscopy (MRFS) experiments. The cantilevers we used had lengths between 13 and 46 μm, a width of about 11 μm, and a thickness between 150 and 600 nm. They were coated with chromium and gold on the backside for a better laser reflection. We characterized these small cantilevers through their frequency spectrum and with electron microscopy. Due to their small size and high resonance frequency we were able to increase the imaging speed by a factor of 10 without any loss in resolution for images from several μm scansize down to the nanometer scale. This was shown on bacterial surface layers (s-layer) with tapping mode under aqueous, near physiological conditions and on nuclear membranes in contact mode in ambient environment. In addition, we showed that single molecular forces can be measured with an up to 5 times higher force sensitivity in comparison to conventional cantilevers with similar spring constants. PMID:22721963

  2. Detecting the golgi protein 73 of liver cancer with micro cantilever

    NASA Astrophysics Data System (ADS)

    Thanh Tuyen Le, Thi; Pham, Van Tho; Nhat Khoa Phan, Thanh; Binh Pham, Van; Thao Le, Van; Hien Tong, Duy

    2014-12-01

    Golgi protein 73 (GP73) is a potential serum biomarker used in diagnosing human hepatocellular carcinoma (HCC). Compared to alpha-fetoprotein, detection of GP73 is expected to give better sensitivity and specificity and thus offers a better method for diagnosis of HCC at an early stage. In this paper, silicon nitride microcantilever was used to detect GP73. The cantilever was modified through many steps to contain antibody of GP73. The result shows that the cantilever can be used as a label-free sensor to detect this kind of biomarker.

  3. Piezoelectric cantilever sensors

    NASA Technical Reports Server (NTRS)

    Shih, Wan Y. (Inventor); Shih, Wei-Heng (Inventor); Shen, Zuyan (Inventor)

    2008-01-01

    A piezoelectric cantilever with a non-piezoelectric, or piezoelectric tip useful as mass and viscosity sensors. The change in the cantilever mass can be accurately quantified by monitoring a resonance frequency shift of the cantilever. For bio-detection, antibodies or other specific receptors of target antigens may be immobilized on the cantilever surface, preferably on the non-piezoelectric tip. For chemical detection, high surface-area selective absorbent materials are coated on the cantilever tip. Binding of the target antigens or analytes to the cantilever surface increases the cantilever mass. Detection of target antigens or analytes is achieved by monitoring the cantilever's resonance frequency and determining the resonance frequency shift that is due to the mass of the adsorbed target antigens on the cantilever surface. The use of a piezoelectric unimorph cantilever allows both electrical actuation and electrical sensing. Incorporating a non-piezoelectric tip (14) enhances the sensitivity of the sensor. In addition, the piezoelectric cantilever can withstand damping in highly viscous liquids and can be used as a viscosity sensor in wide viscosity range.

  4. Determining cantilever stiffness from thermal noise.

    PubMed

    Lübbe, Jannis; Temmen, Matthias; Rahe, Philipp; Kühnle, Angelika; Reichling, Michael

    2013-01-01

    We critically discuss the extraction of intrinsic cantilever properties, namely eigenfrequency f n , quality factor Q n and specifically the stiffness k n of the nth cantilever oscillation mode from thermal noise by an analysis of the power spectral density of displacement fluctuations of the cantilever in contact with a thermal bath. The practical applicability of this approach is demonstrated for several cantilevers with eigenfrequencies ranging from 50 kHz to 2 MHz. As such an analysis requires a sophisticated spectral analysis, we introduce a new method to determine k n from a spectral analysis of the demodulated oscillation signal of the excited cantilever that can be performed in the frequency range of 10 Hz to 1 kHz regardless of the eigenfrequency of the cantilever. We demonstrate that the latter method is in particular useful for noncontact atomic force microscopy (NC-AFM) where the required simple instrumentation for spectral analysis is available in most experimental systems.

  5. Enhanced quality factors and force sensitivity by attaching magnetic beads to cantilevers for atomic force microscopy in liquid

    NASA Astrophysics Data System (ADS)

    Hoof, Sebastian; Nand Gosvami, Nitya; Hoogenboom, Bart W.

    2012-12-01

    Dynamic-mode atomic force microscopy (AFM) in liquid remains complicated due to the strong viscous damping of the cantilever resonance. Here, we show that a high-quality resonance (Q >20) can be achieved in aqueous solution by attaching a microgram-bead at the end of the nanogram-cantilever. The resulting increase in cantilever mass causes the resonance frequency to drop significantly. However, the force sensitivity—as expressed via the minimum detectable force gradient—is hardly affected, because of the enhanced quality factor. Through the enhancement of the quality factor, the attached bead also reduces the relative importance of noise in the deflection detector. It can thus yield an improved signal-to-noise ratio when this detector noise is significant. We describe and analyze these effects for a set-up that includes magnetic actuation of the cantilevers and that can be easily implemented in any AFM system that is compatible with an inverted optical microscope.

  6. Fish-bone-structured acoustic sensor toward silicon cochlear systems

    NASA Astrophysics Data System (ADS)

    Harada, Muneo; Ikeuchi, Naoki; Fukui, Shoichi; Ando, Shigeru

    1998-09-01

    This paper describes a micro mechanical acoustic sensor modeling the basilar membrane of the human cochlea. The skeleton of the acoustic sensor is an array of resonators each of specific frequency selectivity. The mechanical structure of the sensor is designed using FEM analysis to have a particular geometrical structure looking like a fish bone that consists of cantilever ribs extending out from a backbone. Acoustic wave is supposed to be introduced to the diaphragm placed at one end of the backbone to travel in one way along the backbone. During traveling each frequency component of the wave is delivered to the corresponding cantilever according to its resonant frequency. The mechanical vibrations of each cantilever are detected in parallel by use of piezoresistors. The fish-bone structure is fabricated to be suspended in the air on a silicon substrate using silicon micromachining technology. We observe the frequency response of each cantilever to verify fairly sharp frequency selectivity associated with the one- way flow of the vibration energy. The present results encourage us to implement the human auditory system on a silicon chip toward the goal of silicon cochlea.

  7. Ultralow-frequency PiezoMEMS energy harvester using thin-film silicon and parylene substrates

    NASA Astrophysics Data System (ADS)

    Jackson, Nathan; Olszewski, Oskar Z.; O'Murchu, Cian; Mathewson, Alan

    2018-01-01

    Developing a self-sustained leadless pacemaker requires the development of an ultralow-frequency energy harvesting system that can fit within the required dimensions. This paper reports on the design and development of two types of PiezoMEMS energy harvesters that fit within the capsule dimensions and have a low resonant frequency between 20 to 30 Hz, which is required for the application. A bullet-shaped mass was designed to maximize the displacement and enhance power density of the devices. In addition, two types of devices were fabricated and compared (i) a silicon-based cantilever and (ii) a parylene-C-based cantilever with a thin aluminum nitride layer. The silicon device demonstrated higher peak power of 29.8 μW compared with the 6.4 μW for the parylene device. However, due to the low duty cycle of the heart rate and the damping factors of the two materials the average power was significantly higher for the parylene device (2.71 μW) compared with the silicon device (1.22 μW) per cantilever. The results demonstrate that a polymer-based energy harvester can increase the average power due to low damping for an impulse-based vibration application.

  8. Modeling and fabrication of scale-like cantilever for cell capturing

    NASA Astrophysics Data System (ADS)

    Liu, Boyin; Fu, Jing; Muradoglu, Murat

    2013-12-01

    The micro-domain provides excellent conditions for performing biological experiments on small populations of cells and has given rise to the proliferation of so-called lab-on-a-chip devices. In order to fully utilize the benefits of cell assays, means of retaining cells at defined locations over time are required. Here, the creation of scale-like cantilevers, inspired by biomimetics, on planar silicon nitride (Si3N4) film using focused ion beam machining is described. Using SEM imaging, regular tilting of the cantilever with almost no warping of the cantilever was uncovered. Finite element analysis showed that the scale-like cantilever was best at limiting stress concentration without difficulty in manufacture and having stresses more evenly distributed along the edge. It also had a major advantage in that the degree of deflection could be simply altered by changing the central angle. From a piling simulation conducted, it was found that a random delivery of simulated particles on to the scale-like obstacle should create a triangular collection. In the experimental trapping of polystyrene beads in suspension, the basic triangular piling structure was observed, but with extended tails and a fanning out around the obstacle. This was attributed to the aggregation tendency of polystyrene beads that acted on top of the piling behavior. In the experiment with bacterial cells, triangular pile up behind the cantilever was absent and the bacteria cells were able to slip inside the cantilever's opening despite the size of the bacteria being larger than the gap. Overall, the fabricated scale-like cantilever architectures offer a viable way to trap small populations of material in suspension.

  9. Evanescent Microwave Probes on High-Resistivity Silicon and its Application in Characterization of Semiconductors

    NASA Technical Reports Server (NTRS)

    Tabib-Azar, M.; Akinwande, D.; Ponchak, George E.; LeClair, S. R.

    1999-01-01

    In this article we report the design, fabrication, and characterization of very high quality factor 10 GHz microstrip resonators on high-resistivity (high-rho) silicon substrates. Our experiments show that an external quality factor of over 13 000 can be achieved on microstripline resonators on high-rho silicon substrates. Such a high Q factor enables integration of arrays of previously reported evanescent microwave probe (EMP) on silicon cantilever beams. We also demonstrate that electron-hole pair recombination and generation lifetimes of silicon can be conveniently measured by illuminating the resonator using a pulsed light. Alternatively, the EMP was also used to nondestructively monitor excess carrier generation and recombination process in a semiconductor placed near the two-dimensional resonator.

  10. Development of Multi-Degree-Of-Freedom Piezoelectric Energy Harvester Using Interdigital Shaped Cantilevers.

    PubMed

    Cho, Hyunok; Park, Jongcheol; Park, Jae Yeong

    2016-05-01

    A piezoelectric vibration energy harvester with interdigital shaped cantilever was developed by using silicon bulk micromachining technology. The proposed energy harvester was designed to obtain multi degree-of-freedom (m-DOF). Most of the piezoelectric vibration energy harvesters are comprised of mass-loaded cantilever beams having several resonant frequencies. The second resonant frequency of such a device has lower amplitude compared to its first resonant frequency (fundamental frequency). Therefore, the interdigital shaped cantilever has been proposed for multiple fundamental resonant frequencies. The fabricated piezoelectric vibration energy harvester is composed of main cantilever (MC), sub-main cantilever (SMC), and secondary cantilevers (SC). MC surrounds SMC and SC which have same dimension of 5600 x 800 x 10 μm3. The fabricated piezoelectric energy harvester can generate 51.4 mV(p-p) and 11 mV(p-p) of output voltages at 24.2 Hz and 33 Hz of its resonant frequencies by MC. Moreover, it can generate 8 mV(p-p) and 6.6 mV(p-p) of output voltages at 24.2 Hz and 33.2 Hz of its resonant frequencies by SMC; and 364 mV(p-p) of output voltage at 33.6 Hz of its resonant frequency by SC.

  11. SiC-Based Miniature High-Temperature Cantilever Anemometer

    NASA Technical Reports Server (NTRS)

    Okojie, Robert S.; Fralick, Gustave; Saad, George J.

    2004-01-01

    The figure depicts a miniature cantilever-type anemometer that has been developed as a prototype of compact, relatively nonintrusive anemometers that can function at temperatures up to 600 C and that can be expected to be commercially mass-producible at low cost. The design of this anemometer, and especially the packaging aspect of the design, is intended to enable measurement of turbulence in the high-temperature, high-vibration environment of a turbine engine or in any similar environment. The main structural components of the anemometer include a single-crystal SiC cantilever and two polycrystalline SiC clamping plates, all made from chemical-vapor-deposited silicon carbide. Fabrication of these components from the same basic material eliminates thermal-expansion mismatch, which has introduced spurious thermomechanical stresses in cantilever-type anemometers of prior design. The clamping plates are heavily oxidized to improve electrical insulation at high temperature. A cavity that serves as a receptacle for the clamped end of the cantilever is etched into one end of one clamping plate. Trenches that collectively constitute a socket for a multipin electrical plug (for connection to external electronic circuitry) are etched into the opposite end of this clamping plate. Metal strips for electrical contact are deposited on one face of the other clamping plate. Piezoresistive single-crystal SiC thin-film strain gauges are etched in the n-type SiC epilayer in a Wheatstone-bridge configuration. Metal contact pads on the cantilever that extend into the clamping-receptacle area, are obtained by deposition and patterning using standard semiconductor photolithography and etching methods. The cantilever and the two clamping plates are assembled into a sandwich structure that is then clamped in a stainless-steel housing. The Wheatstone- bridge carrying SiC cantilever with the metal contact pads on the piezoresistors is slid into the receptacle in the bottom clamping plate

  12. Cantilever testing of sintered-silver interconnects

    DOE PAGES

    Wereszczak, Andrew A.; Chen, Branndon R.; Jadaan, Osama M.; ...

    2017-10-19

    Cantilever testing is an underutilized test method from which results and interpretations promote greater understanding of the tensile and shear failure responses of interconnects, metallizations, or bonded joints. The use and analysis of this method were pursued through the mechanical testing of sintered-silver interconnects that joined Ni/Au-plated copper pillars or Ti/Ni/Ag-plated silicon pillars to Ag-plated direct bonded copper substrates. Sintered-silver was chosen as the interconnect test medium because of its high electrical and thermal conductivities and high-temperature capability—attractive characteristics for a candidate interconnect in power electronic components and other devices. Deep beam theory was used to improve upon the estimationsmore » of the tensile and shear stresses calculated from classical beam theory. The failure stresses of the sintered-silver interconnects were observed to be dependent on test-condition and test-material-system. In conclusion, the experimental simplicity of cantilever testing, and the ability to analytically calculate tensile and shear stresses at failure, result in it being an attractive mechanical test method to evaluate the failure response of interconnects.« less

  13. Cantilever testing of sintered-silver interconnects

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wereszczak, Andrew A.; Chen, Branndon R.; Jadaan, Osama M.

    Cantilever testing is an underutilized test method from which results and interpretations promote greater understanding of the tensile and shear failure responses of interconnects, metallizations, or bonded joints. The use and analysis of this method were pursued through the mechanical testing of sintered-silver interconnects that joined Ni/Au-plated copper pillars or Ti/Ni/Ag-plated silicon pillars to Ag-plated direct bonded copper substrates. Sintered-silver was chosen as the interconnect test medium because of its high electrical and thermal conductivities and high-temperature capability—attractive characteristics for a candidate interconnect in power electronic components and other devices. Deep beam theory was used to improve upon the estimationsmore » of the tensile and shear stresses calculated from classical beam theory. The failure stresses of the sintered-silver interconnects were observed to be dependent on test-condition and test-material-system. In conclusion, the experimental simplicity of cantilever testing, and the ability to analytically calculate tensile and shear stresses at failure, result in it being an attractive mechanical test method to evaluate the failure response of interconnects.« less

  14. CMOS micromachined capacitive cantilevers for mass sensing

    NASA Astrophysics Data System (ADS)

    Li, Ying-Chung; Ho, Meng-Han; Hung, Shi-Jie; Chen, Meng-Huei; S-C Lu, Michael

    2006-12-01

    In this paper, we present the design, fabrication and characterization of the CMOS micromachined cantilevers for mass sensing in the femtogram range. The cantilevers consisting of multiple metal and dielectric layers are fabricated after completion of a conventional CMOS process by dry etching steps. The cantilevers are electrostatically actuated to resonance by in-plane electrodes. The mechanical resonant frequency is detected capacitively with on-chip circuitry, where the modulation technique is applied to eliminate capacitive feedthrough from the driving port and to lessen the effect of flicker noise. The highest resonant frequency of the cantilevers is measured at 396.46 kHz with a quality factor of 2600 at 10 mTorr. The resonant frequency shift after deposition of a 0.1 µm SiO2 layer is 140 Hz, averaging 353 fg Hz-1.

  15. A bulk micromachined lead zinconate titanate cantilever energy harvester with inter-digital IrO(x) electrodes.

    PubMed

    Park, Jongcheol; Park, Jae Yeong

    2013-10-01

    A piezoelectric vibration energy harvester with inter-digital IrO(x) electrode was developed by using silicon bulk micromachining technology. Most PZT cantilever based energy harvesters have utilized platinum electrode material. However, the PZT fatigue characteristics and adhesion/delamination problems caused by the platinum electrode might be serious problem in reliability of energy harvester. To address these problems, the iridium oxide was newly applied. The proposed energy harvester was comprised of bulk micromachined silicon cantilever with 800 x 1000 x 20 microm3, which having a silicon supporting membrane, sol-gel-spin coated Pb(Zr52, Ti48)O3 thin film, and sputtered inter-digitally shaped IrO(x) electrodes, and silicon inertial mass with 1000 x 1000 x 500 microm3 to adjust its resonant frequency. The fabricated energy harvester generated 1 microW of electrical power to 470 komega of load resistance and 1.4 V(peak-to-peak) from a vibration of 0.4 g at 1.475 kHz. The corresponding power density was 6.25 mW x cm(-3) x g(-2). As expected, its electrical failure was significantly improved.

  16. Frequency dependence of viscous and viscoelastic dissipation in coated micro-cantilevers from noise measurement.

    PubMed

    Paolino, P; Bellon, L

    2009-10-07

    We measure the mechanical thermal noise of soft silicon atomic force microscope cantilevers. Using an interferometric setup, we obtain a resolution down to 10(-14) m Hz(-1/2) on a wide spectral range (3-10(5) Hz). The low frequency behavior depends dramatically on the presence of a reflective coating: almost flat spectra for uncoated cantilevers versus a 1/f like trend for coated ones. The addition of a viscoelastic term in models of the mechanical system can account for this observation. Use of Kramers-Kronig relations validate this approach with a complete determination of the response of the cantilever: a power law with a small coefficient is found for the frequency dependence of viscoelasticity due to the coating, whereas the viscous damping due to the surrounding atmosphere is accurately described by the Sader model.

  17. Chemical sensor with oscillating cantilevered probe

    DOEpatents

    Adams, Jesse D

    2013-02-05

    The invention provides a method of detecting a chemical species with an oscillating cantilevered probe. A cantilevered beam is driven into oscillation with a drive mechanism coupled to the cantilevered beam. A free end of the oscillating cantilevered beam is tapped against a mechanical stop coupled to a base end of the cantilevered beam. An amplitude of the oscillating cantilevered beam is measured with a sense mechanism coupled to the cantilevered beam. A treated portion of the cantilevered beam is exposed to the chemical species, wherein the cantilevered beam bends when exposed to the chemical species. A second amplitude of the oscillating cantilevered beam is measured, and the chemical species is determined based on the measured amplitudes.

  18. Fabrication of microelectromechanical systems (MEMS) cantilevers for photoacoustic (PA) detection of terahertz (THz) radiation

    NASA Astrophysics Data System (ADS)

    Newberry, R.; Glauvitz, N.; Coutu, R. A.; Medvedev, I. R.; Petkie, D.

    2014-03-01

    Historically, spectroscopy has been a cumbersome endeavor due to the relatively large sizes (3ft - 100ft in length) of modern spectroscopy systems. Taking advantage of the photoacoustic effect would allow for much smaller absorption chambers since the photoacoustic (PA) effect is independent of the absorption path length. In order to detect the photoacoustic waves being generated, a photoacoustic microphone would be required. This paper reports on the fabrication efforts taken in order to create microelectromechanical systems (MEMS) cantilevers for the purpose of sensing photoacoustic waves generated via terahertz (THz) radiation passing through a gaseous sample. The cantilevers are first modeled through the use of the finite element modeling software, CoventorWare®. The cantilevers fabricated with bulk micromachining processes and are 7x2x0.010mm on a silicon-on-insulator (SOI) wafer which acts as the physical structure of the cantilever. The devices are released by etching through the wafer's backside and etching through the buried oxide with hydrofluoric acid. The cantilevers are placed in a test chamber and their vibration and deflection are measured via a Michelson type interferometer that reflects a laser off a gold tip evaporated onto the tip of the cantilever. The test chamber is machined from stainless steel and housed in a THz testing environment at Wright State University. Fabricated devices have decreased residual stress and larger radii of curvatures by approximately 10X.

  19. Mechanical characterization of thin TiO2 films by means of microelectromechanical systems-based cantilevers

    NASA Astrophysics Data System (ADS)

    Adami, A.; Decarli, M.; Bartali, R.; Micheli, V.; Laidani, N.; Lorenzelli, L.

    2010-01-01

    The measurement of mechanical parameters by means of microcantilever structures offers a reliable and accurate alternative to traditional methods, especially when dealing with thin films, which are extensively used in microfabrication technology and nanotechnology. In this work, microelectromechanical systems (MEMS)-based piezoresistive cantilevers were realized and used for the determination of Young's modulus and residual stress of thin titanium dioxide (TiO2) deposited by sputtering from a TiO2 target using a rf plasma discharge. Films were deposited at different thicknesses, ranging from a few to a hundred nanometers. Dedicated silicon microcantilevers were designed through an optimization of geometrical parameters with the development of analytical as well as numerical models. Young's modulus and residual stress of sputtered TiO2 films were assessed by using both mechanical characterization based on scanning profilometers and piezoresistive sensing elements integrated in the silicon cantilevers. Results of MEMS-based characterization were combined with the tribological and morphological properties measured by microscratch test and x-ray diffraction analysis.

  20. Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting

    NASA Astrophysics Data System (ADS)

    Cho, Hyunok; Park, Jongcheol; Park, Jae Yeong

    2017-12-01

    This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it with ICs. The d33 piezoelectric mode was applied to achieve a large output voltage by using inter-digitated electrodes, and the PZT thin film on polyimide layer has a remnant polarization and coercive filed of approximately 2 P r = 47.9 μC/cm2 and 2 E c = 78.8 kV/cm, respectively. The relative dielectric constant was 900. The fabricated micro-electromechanical systems energy harvester generated output voltages of 1.2 V and output power of 117 nW at its optimal resistive load of 6.6 MΩ from its resonant frequency of 97.8 Hz with an acceleration of 5 m/s2.

  1. Method for providing a compliant cantilevered micromold

    DOEpatents

    Morales, Alfredo M.; Domeier, Linda A.; Gonzales, Marcela G.; Keifer, Patrick N.; Garino, Terry J.

    2008-12-16

    A compliant cantilevered three-dimensional micromold is provided. The compliant cantilevered micromold is suitable for use in the replication of cantilevered microparts and greatly simplifies the replication of such cantilevered parts. The compliant cantilevered micromold may be used to fabricate microparts using casting or electroforming techniques. When the compliant micromold is used to fabricate electroformed cantilevered parts, the micromold will also comprise an electrically conducting base formed by a porous metal substrate that is embedded within the compliant cantilevered micromold. Methods for fabricating the compliant cantilevered micromold as well as methods of replicating cantilevered microparts using the compliant cantilevered micromold are also provided.

  2. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

    PubMed Central

    Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng

    2010-01-01

    Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficient α related to the two frequency shifts is confirmed. PMID:22163588

  3. Measurement of Mechanical Properties of Cantilever Shaped Materials

    PubMed Central

    Finot, Eric; Passian, Ali; Thundat, Thomas

    2008-01-01

    Microcantilevers were first introduced as imaging probes in Atomic Force Microscopy (AFM) due to their extremely high sensitivity in measuring surface forces. The versatility of these probes, however, allows the sensing and measurement of a host of mechanical properties of various materials. Sensor parameters such as resonance frequency, quality factor, amplitude of vibration and bending due to a differential stress can all be simultaneously determined for a cantilever. When measuring the mechanical properties of materials, identifying and discerning the most influential parameters responsible for the observed changes in the cantilever response are important. We will, therefore, discuss the effects of various force fields such as those induced by mass loading, residual stress, internal friction of the material, and other changes in the mechanical properties of the microcantilevers. Methods to measure variations in temperature, pressure, or molecular adsorption of water molecules are also discussed. Often these effects occur simultaneously, increasing the number of parameters that need to be concurrently measured to ensure the reliability of the sensors. We therefore systematically investigate the geometric and environmental effects on cantilever measurements including the chemical nature of the underlying interactions. To address the geometric effects we have considered cantilevers with a rectangular or circular cross section. The chemical nature is addressed by using cantilevers fabricated with metals and/or dielectrics. Selective chemical etching, swelling or changes in Young's modulus of the surface were investigated by means of polymeric and inorganic coatings. Finally to address the effect of the environment in which the cantilever operates, the Knudsen number was determined to characterize the molecule-cantilever collisions. Also bimaterial cantilevers with high thermal sensitivity were used to discern the effect of temperature variations. When appropriate

  4. Cantilevered probe detector with piezoelectric element

    DOEpatents

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2014-04-29

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  5. Cantilevered probe detector with piezoelectric element

    DOEpatents

    Adams, Jesse D; Sulchek, Todd A; Feigin, Stuart C

    2013-04-30

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  6. Cantilevered probe detector with piezoelectric element

    DOEpatents

    Adams, Jesse D [Reno, NV; Sulchek, Todd A [Oakland, CA; Feigin, Stuart C [Reno, NV

    2012-07-10

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  7. Cantilevered probe detector with piezoelectric element

    DOEpatents

    Adams, Jesse D.; Sulchek, Todd A.; Feigin, Stuart C.

    2010-04-06

    A disclosed chemical detection system for detecting a target material, such as an explosive material, can include a cantilevered probe, a probe heater coupled to the cantilevered probe, and a piezoelectric element disposed on the cantilevered probe. The piezoelectric element can be configured as a detector and/or an actuator. Detection can include, for example, detecting a movement of the cantilevered probe or a property of the cantilevered probe. The movement or a change in the property of the cantilevered probe can occur, for example, by adsorption of the target material, desorption of the target material, reaction of the target material and/or phase change of the target material. Examples of detectable movements and properties include temperature shifts, impedance shifts, and resonant frequency shifts of the cantilevered probe. The overall chemical detection system can be incorporated, for example, into a handheld explosive material detection system.

  8. Measurement of Contractile Stress Generated by Cultured Rat Muscle on Silicon Cantilevers for Toxin Detection and Muscle Performance Enhancement

    PubMed Central

    Wilson, Kerry; Das, Mainak; Wahl, Kathryn J.; Colton, Richard J.; Hickman, James

    2010-01-01

    Background To date, biological components have been incorporated into MEMS devices to create cell-based sensors and assays, motors and actuators, and pumps. Bio-MEMS technologies present a unique opportunity to study fundamental biological processes at a level unrealized with previous methods. The capability to miniaturize analytical systems enables researchers to perform multiple experiments in parallel and with a high degree of control over experimental variables for high-content screening applications. Methodology/Principal Findings We have demonstrated a biological microelectromechanical system (BioMEMS) based on silicon cantilevers and an AFM detection system for studying the physiology and kinetics of myotubes derived from embryonic rat skeletal muscle. It was shown that it is possible to interrogate and observe muscle behavior in real time, as well as selectively stimulate the contraction of myotubes with the device. Stress generation of the tissue was estimated using a modification of Stoney's equation. Calculated stress values were in excellent agreement with previously published results for cultured myotubes, but not adult skeletal muscle. Other parameters such as time to peak tension (TPT), the time to half relaxation (½RT) were compared to the literature. It was observed that the myotubes grown on the BioMEMS device, while generating stress magnitudes comparable to those previously published, exhibited slower TPT and ½RT values. However, growth in an enhanced media increased these values. From these data it was concluded that the myotubes cultured on the cantilevers were of an embryonic phenotype. The system was also shown to be responsive to the application of a toxin, veratridine. Conclusions/Significance The device demonstrated here will provide a useful foundation for studying various aspects of muscle physiology and behavior in a controlled high-throughput manner as well as be useful for biosensor and drug discovery applications. PMID:20548775

  9. Label-free glucose detection using cantilever sensor technology based on gravimetric detection principles.

    PubMed

    Hsieh, Shuchen; Hsieh, Shu-Ling; Hsieh, Chiung-Wen; Lin, Po-Chiao; Wu, Chun-Hsin

    2013-01-01

    Efficient maintenance of glucose homeostasis is a major challenge in diabetes therapy, where accurate and reliable glucose level detection is required. Though several methods are currently used, these suffer from impaired response and often unpredictable drift, making them unsuitable for long-term therapeutic practice. In this study, we demonstrate a method that uses a functionalized atomic force microscope (AFM) cantilever as the sensor for reliable glucose detection with sufficient sensitivity and selectivity for clinical use. We first modified the AFM tip with aminopropylsilatrane (APS) and then adsorbed glucose-specific lectin concanavalin A (Con A) onto the surface. The Con A/APS-modified probes were then used to detect glucose by monitoring shifts in the cantilever resonance frequency. To confirm the molecule-specific interaction, AFM topographical images were acquired of identically treated silicon substrates which indicated a specific attachment for glucose-Con A and not for galactose-Con A. These results demonstrate that by monitoring the frequency shift of the AFM cantilever, this sensing system can detect the interaction between Con A and glucose, one of the biomolecule recognition processes, and may assist in the detection and mass quantification of glucose for clinical applications with very high sensitivity.

  10. Controlling the opto-mechanics of a cantilever in an interferometer via cavity loss

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Schmidsfeld, A. von, E-mail: avonschm@uos.de; Reichling, M., E-mail: reichling@uos.de

    2015-09-21

    In a non-contact atomic force microscope, based on interferometric cantilever displacement detection, the optical return loss of the system is tunable via the distance between the fiber end and the cantilever. We utilize this for tuning the interferometer from a predominant Michelson to a predominant Fabry-Pérot characteristics and introduce the Fabry-Pérot enhancement factor as a quantitative measure for multibeam interference in the cavity. This experimentally easily accessible and adjustable parameter provides a control of the opto-mechanical interaction between the cavity light field and the cantilever. The quantitative assessment of the light pressure acting on the cantilever oscillating in the cavitymore » via the frequency shift allows an in-situ measurement of the cantilever stiffness with remarkable precision.« less

  11. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

    NASA Astrophysics Data System (ADS)

    Mathew, Ribu; Ravi Sankar, A.

    2018-06-01

    In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.[Figure not available: see fulltext.

  12. Force microscopy experiments with ultrasensitive cantilevers.

    PubMed

    Rast, S; Gysin, U; Ruff, P; Gerber, Ch; Meyer, E; Lee, D W

    2006-04-14

    Force microscopy experiments with the pendulum geometry are performed with attonewton sensitivity (Rugar et al 2004 Nature 43 329). Single-crystalline cantilevers with sub-millinewton spring constants were annealed under ultrahigh-vacuum conditions. It is found that annealing with temperatures below 500 °C can improve the quality factor by an order of magnitude. The high force sensitivity of these ultrasoft cantilevers is used to characterize small magnetic and superconductive particles, which are mounted on the end of the cantilever. Their magnetic properties are analysed in magnetic fields as a function of temperature. The transition of a superconducting sample mounted on a cantilever is measured by the detection of frequency shifts. An increase of dissipation is observed below the critical temperature. The magnetic moment of ferromagnetic particles is determined by real time frequency detection with a phase-locked loop (PLL) as a function of the magnetic field. The dissipation between the probing tip and the sample is another important ingredient for ultrasensitive force measurements. It is found that dissipation increases at separations of 30 nm. The origins of this type of dissipation are poorly understood. However, it is predicted theoretically that adsorbates can increase this dissipation channel (Volokitin and Persson 2005 Phys. Rev. Lett. 94 086104). First experiments are performed under ultrahigh vacuum to investigate this type of dissipation. Long-range dissipation is closely related to long-range forces. The distance dependence of the contact potential is found to be an important aspect.

  13. Fabrication of wear-resistant silicon microprobe tips for high-speed surface roughness scanning devices

    NASA Astrophysics Data System (ADS)

    Wasisto, Hutomo Suryo; Yu, Feng; Doering, Lutz; Völlmeke, Stefan; Brand, Uwe; Bakin, Andrey; Waag, Andreas; Peiner, Erwin

    2015-05-01

    Silicon microprobe tips are fabricated and integrated with piezoresistive cantilever sensors for high-speed surface roughness scanning systems. The fabrication steps of the high-aspect-ratio silicon microprobe tips were started with photolithography and wet etching of potassium hydroxide (KOH) resulting in crystal-dependent micropyramids. Subsequently, thin conformal wear-resistant layer coating of aluminum oxide (Al2O3) was demonstrated on the backside of the piezoresistive cantilever free end using atomic layer deposition (ALD) method in a binary reaction sequence with a low thermal process and precursors of trimethyl aluminum and water. The deposited Al2O3 layer had a thickness of 14 nm. The captured atomic force microscopy (AFM) image exhibits a root mean square deviation of 0.65 nm confirming the deposited Al2O3 surface quality. Furthermore, vacuum-evaporated 30-nm/200-nm-thick Au/Cr layers were patterned by lift-off and served as an etch mask for Al2O3 wet etching and in ICP cryogenic dry etching. By using SF6/O2 plasma during inductively coupled plasma (ICP) cryogenic dry etching, micropillar tips were obtained. From the preliminary friction and wear data, the developed silicon cantilever sensor has been successfully used in 100 fast measurements of 5- mm-long standard artifact surface with a speed of 15 mm/s and forces of 60-100 μN. Moreover, the results yielded by the fabricated silicon cantilever sensor are in very good agreement with those of calibrated profilometer. These tactile sensors are targeted for use in high-aspect-ratio microform metrology.

  14. Enhanced Quality Factor Label-free Biosensing with Micro-Cantilevers Integrated into Microfluidic Systems.

    PubMed

    Kartanas, Tadas; Ostanin, Victor; Challa, Pavan Kumar; Daly, Ronan; Charmet, Jerome; Knowles, Tuomas P J

    2017-11-21

    Microelectromechanical systems (MEMS) have enabled the development of a new generation of sensor platforms. Acoustic sensor operation in liquid, the native environment of biomolecules, causes, however, significant degradation of sensing performance due to viscous drag and relies on the availability of capture molecules to bind analytes of interest to the sensor surface. Here, we describe a strategy to interface MEMS sensors with microfluidic platforms through an aerosol spray. Our sensing platform comprises a microfluidic spray nozzle and a microcantilever array operated in dynamic mode within a closed loop oscillator. A solution containing the analyte is sprayed uniformly through picoliter droplets onto the microcantilever surface; the micrometer-scale drops evaporate rapidly and leave the solutes behind, adding to the mass of the cantilever. This sensing scheme results in a 50-fold increase in the quality factor compared to operation in liquid, yet allows the analytes to be introduced into the sensing system from a solution phase. It achieves a 370 femtogram limit of detection, and we demonstrate quantitative label-free analysis of inorganic salts and model proteins. These results demonstrate that the standard resolution limits of cantilever sensing in dynamic mode can be overcome with the integration of spray microfluidics with MEMS.

  15. Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures

    NASA Astrophysics Data System (ADS)

    Sökmen, Ü.; Stranz, A.; Fündling, S.; Wehmann, H.-H.; Bandalo, V.; Bora, A.; Tornow, M.; Waag, A.; Peiner, E.

    2009-10-01

    Inductively coupled plasma (ICP) cryogenic dry etching was used to etch submicron pores, nano contact lines, submicron diameter pillars, thin and thick cantilevers, membrane structures and anisotropic deep structures with high aspect ratios in silicon for bio-nanoelectronics, optoelectronics and nano-micro electromechanical systems (NMEMS). The ICP cryogenic dry etching gives us the advantage of switching plasmas between etch rates of 13 nm min-1 and 4 µm min-1 for submicron pores and for membrane structures, respectively. A very thin photoresist mask can endure at -75 °C even during etching 70 µm deep for cantilevers and 300 µm deep for membrane structures. Coating the backsides of silicon membrane substrates with a thin photoresist film inhibited the lateral etching of cantilevers during their front release. Between -95 °C and -140 °C, we realized crystallographic-plane-dependent etching that creates facets only at the etch profile bottom. By varying the oxygen content and the process temperature, we achieved good control over the shape of the etched structures. The formation of black silicon during membrane etching down to 300 µm was delayed by reducing the oxygen content.

  16. All-Optical Cantilever-Enhanced Photoacoustic Spectroscopy in the Open Environment

    NASA Astrophysics Data System (ADS)

    Wei, Wei; Zhu, Yong; Lin, Cheng; Tian, Li; Xu, Zhuwen; Nong, Jinpeng

    2015-06-01

    A novel all-optical cantilever-enhanced photoacoustic spectroscopy technique for trace gas detection in the open environment is proposed. A cantilever is set off-beam to "listen to" the photoacoustic signal, and an improved quadrature-point stabilization Fabry-Perot demodulation unit is used to pick up the vibration signal of the acoustic transducer instead of a complicated Michelson interferometer. The structure parameters of the cantilever are optimized to make the sensing system work more stably and reliably using a finite element method, which is then fabricated by surface micro-machining technology. Finally, related experiments are carried out to detect the absorption of water vapor at one atmosphere in the open environment. It was found that the normalized noise-equivalent absorption coefficient obtained by a traditional Fabry-Perot demodulation unit is , while that by a quadrature- point stabilization Fabry-Perot demodulation unit is , which indicates that the sensitivity is increased by a factor of 3.1 using improved cantilever-enhanced photoacoustic spectroscopy.

  17. Graphene cantilever under Casimir force

    NASA Astrophysics Data System (ADS)

    Derras-Chouk, Amel; Chudnovsky, Eugene M.; Garanin, Dmitry A.; Jaafar, Reem

    2018-05-01

    The stability of graphene cantilever under Casimir attraction to an underlying conductor is investigated. The dependence of the instability threshold on temperature and flexural rigidity is obtained. Analytical work is supplemented by numerical computation of the critical temperature above which the graphene cantilever irreversibly bends down and attaches to the conductor. The geometry of the attachment and exfoliation of the graphene sheet is discussed. It is argued that graphene cantilever can be an excellent tool for precision measurements of the Casimir force.

  18. Oscillations of end loaded cantilever beams

    NASA Astrophysics Data System (ADS)

    Macho-Stadler, E.; Elejalde-García, M. J.; Llanos-Vázquez, R.

    2015-09-01

    This article presents several simple experiments based on changing transverse vibration frequencies in a cantilever beam, when acted on by an external attached mass load at the free end. By using a mechanical wave driver, available in introductory undergraduate laboratories, we provide various experimental results for end loaded cantilever beams that fit reasonably well into a linear equation. The behaviour of the cantilever beam’s weak-damping resonance response is studied for the case of metal resonance strips. As the mass load increases, a more pronounced decrease occurs in the fundamental frequency of beam vibration. It is important to note that cantilever construction is often used in architectural design and engineering construction projects but current analysis also predicts the influence of mass load on the sound generated by musical free reeds with boundary conditions similar to a cantilever beam.

  19. A flexoelectric microelectromechanical system on silicon.

    PubMed

    Bhaskar, Umesh Kumar; Banerjee, Nirupam; Abdollahi, Amir; Wang, Zhe; Schlom, Darrell G; Rijnders, Guus; Catalan, Gustau

    2016-03-01

    Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV(-1), comparable to that of state-of-the-art piezoelectric bimorph cantilevers.

  20. Influence of different cantilever extensions and glass or polyaramide reinforcement fibers on fracture strength of implant-supported temporary.

    PubMed

    Colán Guzmán, Paola; Freitas, Fernando Furtado Antunes de; Ferreira, Paulo Martins; Freitas, César Antunes de; Reis, Kátia Rodrigues

    2008-01-01

    In long-term oral rehabilitation treatments, resistance of provisional crowns is a very important factor, especially in cases of an extensive edentulous distal space. The aim of this laboratorial study was to evaluate an acrylic resin cantilever-type prosthesis regarding the flexural strength of its in-balance portion as a function of its extension variation and reinforcement by two types of fibers (glass and polyaramid), considering that literature is not conclusive on this subject. Each specimen was composed by 3 total crowns at its mesial portion, each one attached to an implant component (abutment), while the distal portion (cantilever) had two crowns. Each specimen was constructed by injecting acrylic resin into a two-part silicone matrix placed on a metallic base. In each specimen, the crowns were fabricated with either acrylic resin (control group) or acrylic resin reinforced by glass (Fibrante, Angelus) or polyaramide (Kevlar 49, Du Pont) fibers. Compression load was applied on the cantilever, in a point located 7, 14 or 21 mm from the distal surface of the nearest crown with abutment, to simulate different extensions. The specimen was fixed on the metallic base and the force was applied until fracture in a universal test machine. Each one of the 9 sub-groups was composed by 10 specimens. Flexural strength means (in kgf) for the distances of 7, 14 and 21 mm were, respectively, 28.07, 8.27 and 6.39 for control group, 31.89, 9.18 and 5.16 for Kevlar 49 and 30.90, 9.31 and 6.86 for Fibrante. Data analysis ANOVA showed statistically significant difference (p<0.05) only regarding cantilever extension. Tukey's test detected significantly higher flexural strength for the 7 mm-distance, followed by 14 and 21 mm. Fracture was complete only on specimens of non-reinforced groups.

  1. Study on the Weak Stress in Flexural MEMS Cantilever

    NASA Astrophysics Data System (ADS)

    Ge, Yuetao; Ren, Yan

    2018-03-01

    In order to design a better piezoresistive MEMS cantilever beam, especially for cantilever beams that will detect weak forces or will be subjected to weak forces, this paper uses study on the weak stress in flexural MEMS cantilever. The sensor design structure, divided into protective layer, piezoresistive layer, support layer. The protective layer is responsible for protecting the piezoresistive layer so that the varistor is insulated from the outside; the piezoresistive layer is used to make the varistor; the support layer forms the main part of the cantilever beam, the majority of the cantilever beam. This paper has some value for cantilever multilayer structure design and cantilever beam size design.

  2. A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure.

    PubMed

    Wang, Yu-Hsiang; Lee, Chia-Yen; Chiang, Che-Ming

    2007-10-17

    This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms -1 ), a high velocity measurement limit (45ms -1 ) and a rapid response time (0.53 s).

  3. Vibration energy harvester with sustainable power based on a single-crystal piezoelectric cantilever array.

    PubMed

    Kim, Moonkeun; Lee, Sang-Kyun; Ham, Yong-Hyun; Yang, Yil Suk; Kwon, Jong-Kee; Kwon, Kwang-Ho

    2012-08-01

    We designed and fabricated a bimorph cantilever array for sustainable power with an integrated Cu proof mass to obtain additional power and current. We fabricated a cantilever system using single-crystal piezoelectric material and compared the calculations for single and arrayed cantilevers to those obtained experimentally. The vibration energy harvester had resonant frequencies of 60.4 and 63.2 Hz for short and open circuits, respectively. The damping ratio and quality factor of the cantilever device were 0.012 and 41.66, respectively. The resonant frequency at maximum average power was 60.8 Hz. The current and highest average power of the harvester array were found to be 0.728 mA and 1.61 mW, respectively. The sustainable maximum power was obtained after slightly shifting the short-circuit frequency. In order to improve the current and power using an array of cantilevers, we also performed energy conversion experiments.

  4. INFLUENCE OF DIFFERENT CANTILEVER EXTENSIONS AND GLASS OR POLYARAMID REINFORCEMENT FIBERS ON FRACTURE STRENGTH OF IMPLANT-SUPPORTED TEMPORARY FIXED PROSTHESIS

    PubMed Central

    Colán Guzmán, Paola; de Freitas, Fernando Furtado Antunes; Ferreira, Paulo Martins; de Freitas, César Antunes; Reis, Kátia Rodrigues

    2008-01-01

    In long-term oral rehabilitation treatments, resistance of provisional crowns is a very important factor, especially in cases of an extensive edentulous distal space. The aim of this laboratorial study was to evaluate an acrylic resin cantilever-type prosthesis regarding the flexural strength of its in-balance portion as a function of its extension variation and reinforcement by two types of fibers (glass and polyaramid), considering that literature is not conclusive on this subject. Each specimen was composed by 3 total crowns at its mesial portion, each one attached to an implant component (abutment), while the distal portion (cantilever) had two crowns. Each specimen was constructed by injecting acrylic resin into a two-part silicone matrix placed on a metallic base. In each specimen, the crowns were fabricated with either acrylic resin (control group) or acrylic resin reinforced by glass (Fibrante, Angelus) or polyaramide (Kevlar 49, Du Pont) fibers. Compression load was applied on the cantilever, in a point located 7, 14 or 21 mm from the distal surface of the nearest crown with abutment, to simulate different extensions. The specimen was fixed on the metallic base and the force was applied until fracture in a universal test machine. Each one of the 9 sub-groups was composed by 10 specimens. Flexural strength means (in kgf) for the distances of 7, 14 and 21 mm were, respectively, 28.07, 8.27 and 6.39 for control group, 31.89, 9.18 and 5.16 for Kevlar 49 and 30.90, 9.31 and 6.86 for Fibrante. Data analysis ANOVA showed statistically significant difference (p<0.05) only regarding cantilever extension. Tukey's test detected significantly higher flexural strength for the 7 mm-distance, followed by 14 and 21 mm. Fracture was complete only on specimens of non-reinforced groups. PMID:19089201

  5. Gauge Factor and Stretchability of Silicon-on-Polymer Strain Gauges

    PubMed Central

    Yang, Shixuan; Lu, Nanshu

    2013-01-01

    Strain gauges are widely applied to measure mechanical deformation of structures and specimens. While metallic foil gauges usually have a gauge factor slightly over 2, single crystalline silicon demonstrates intrinsic gauge factors as high as 200. Although silicon is an intrinsically stiff and brittle material, flexible and even stretchable strain gauges have been achieved by integrating thin silicon strips on soft and deformable polymer substrates. To achieve a fundamental understanding of the large variance in gauge factor and stretchability of reported flexible/stretchable silicon-on-polymer strain gauges, finite element and analytically models are established to reveal the effects of the length of the silicon strip, and the thickness and modulus of the polymer substrate. Analytical results for two limiting cases, i.e., infinitely thick substrate and infinitely long strip, have found good agreement with FEM results. We have discovered that strains in silicon resistor can vary by orders of magnitude with different substrate materials whereas strip length or substrate thickness only affects the strain level mildly. While the average strain in silicon reflects the gauge factor, the maximum strain in silicon governs the stretchability of the system. The tradeoff between gauge factor and stretchability of silicon-on-polymer strain gauges has been proposed and discussed. PMID:23881128

  6. Silicon sample holder for molecular beam epitaxy on pre-fabricated integrated circuits

    NASA Technical Reports Server (NTRS)

    Hoenk, Michael E. (Inventor); Grunthaner, Paula J. (Inventor); Grunthaner, Frank J. (Inventor)

    1994-01-01

    The sample holder of the invention is formed of the same semiconductor crystal as the integrated circuit on which the molecular beam expitaxial process is to be performed. In the preferred embodiment, the sample holder comprises three stacked micro-machined silicon wafers: a silicon base wafer having a square micro-machined center opening corresponding in size and shape to the active area of a CCD imager chip, a silicon center wafer micro-machined as an annulus having radially inwardly pointing fingers whose ends abut the edges of and center the CCD imager chip within the annulus, and a silicon top wafer micro-machined as an annulus having cantilevered membranes which extend over the top of the CCD imager chip. The micro-machined silicon wafers are stacked in the order given above with the CCD imager chip centered in the center wafer and sandwiched between the base and top wafers. The thickness of the center wafer is about 20% less than the thickness of the CCD imager chip. Preferably, four titanium wires, each grasping the edges of the top and base wafers, compress all three wafers together, flexing the cantilever fingers of the top wafer to accommodate the thickness of the CCD imager chip, acting as a spring holding the CCD imager chip in place.

  7. Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.

    PubMed

    Gall-Borrut, P; Belier, B; Falgayrettes, P; Castagne, M; Bergaud, C; Temple-Boyer, P

    2001-04-01

    We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.

  8. Single-crystal diamond nanomechanical resonators with quality factors exceeding one million

    NASA Astrophysics Data System (ADS)

    Tao, Y.; Boss, J. M.; Moores, B. A.; Degen, C. L.

    2014-04-01

    Diamond has gained a reputation as a uniquely versatile material, yet one that is intricate to grow and process. Resonating nanostructures made of single-crystal diamond are expected to possess excellent mechanical properties, including high-quality factors and low dissipation. Here we demonstrate batch fabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm and lateral dimensions up to 240 μm. Quality factors exceeding one million are found at room temperature, surpassing those of state-of-the-art single-crystal silicon cantilevers of similar dimensions by roughly an order of magnitude. The corresponding thermal force noise for the best cantilevers is ~5·10-19 N Hz-1/2 at millikelvin temperatures. Single-crystal diamond could thus directly improve existing force and mass sensors by a simple substitution of resonator material. Presented methods are easily adapted for fabrication of nanoelectromechanical systems, optomechanical resonators or nanophotonic devices that may lead to new applications in classical and quantum science.

  9. High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy.

    PubMed

    Lai, Y W; Hamann, S; Ehmann, M; Ludwig, A

    2011-06-01

    We report the development of an advanced high-throughput stress characterization method for thin film materials libraries sputter-deposited on micro-machined cantilever arrays consisting of around 1500 cantilevers on 4-inch silicon-on-insulator wafers. A low-cost custom-designed digital holographic microscope (DHM) is employed to simultaneously monitor the thin film thickness, the surface topography and the curvature of each of the cantilevers before and after deposition. The variation in stress state across the thin film materials library is then calculated by Stoney's equation based on the obtained radii of curvature of the cantilevers and film thicknesses. DHM with nanometer-scale out-of-plane resolution allows stress measurements in a wide range, at least from several MPa to several GPa. By using an automatic x-y translation stage, the local stresses within a 4-inch materials library are mapped with high accuracy within 10 min. The speed of measurement is greatly improved compared with the prior laser scanning approach that needs more than an hour of measuring time. A high-throughput stress measurement of an as-deposited Fe-Pd-W materials library was evaluated for demonstration. The fast characterization method is expected to accelerate the development of (functional) thin films, e.g., (magnetic) shape memory materials, whose functionality is greatly stress dependent. © 2011 American Institute of Physics

  10. A micromachined carbon nanotube film cantilever-based energy cell

    NASA Astrophysics Data System (ADS)

    Gong, Zhongcheng; He, Yuan; Tseng, Yi-Hsuan; O'Neal, Chad; Que, Long

    2012-08-01

    This paper reports a new type of energy cell based on micromachined carbon nanotube film (CNF)-lead zirconate titanate cantilevers that is fabricated on silicon substrates. Measurements found that this type of micro-energy cell generates both AC voltages due to the self-reciprocation of the microcantilevers and DC voltages due to the thermoelectric effect upon exposure to light and thermal radiation, resulting from the unique optical and thermal properties of the CNF. Typically the measured power density of the micro-energy cell can be from 4 to 300 μW cm-2 when it is exposed to sunlight under different operational conditions. It is anticipated that hundreds of integrated micro-energy cells can generate power in the range of milliwatts, paving the way for the construction of self-powered micro- or nanosystems.

  11. Physics-based signal processing algorithms for micromachined cantilever arrays

    DOEpatents

    Candy, James V; Clague, David S; Lee, Christopher L; Rudd, Robert E; Burnham, Alan K; Tringe, Joseph W

    2013-11-19

    A method of using physics-based signal processing algorithms for micromachined cantilever arrays. The methods utilize deflection of a micromachined cantilever that represents the chemical, biological, or physical element being detected. One embodiment of the method comprises the steps of modeling the deflection of the micromachined cantilever producing a deflection model, sensing the deflection of the micromachined cantilever and producing a signal representing the deflection, and comparing the signal representing the deflection with the deflection model.

  12. Evaluation of sensitivity and selectivity of piezoresistive cantilever-array sensors

    NASA Astrophysics Data System (ADS)

    Yoshikawa, Genki; Lang, Hans-Peter; Staufer, Urs; Vettiger, Peter; Sakurai, Toshio; Gerber, Christoph

    2008-03-01

    Microfabricated cantilever-array sensors have attracted much attention in recent years due to their real-time detection of low concentration of molecules. Since the piezoresistive cantilever-array sensors do not require a bulky and expensive optical read-out system, they possess many advantages compared with optical read-out cantilever-array sensors. They can be miniaturized and integrated into a match-box sized device. In this study, we present the piezoresistive cantilever-array sensor system and evaluate its sensitivity and selectivity using various vapors of molecules, including alkane molecules with different chain length from 5 (n-pentane) to 12 (n-dodecane). Piezoresistive cantilevers were coated with different polymers (PVP, PAAM, PEI, and PVA) using an inkjet spotter. Each cantilever has a reference cantilever, constituting a Wheatstone-bridge. Each vapor was mixed with a constant nitrogen gas flow and introduced into the measurement chamber. According to the principle component analysis of data obtained, each molecule can be clearly distinguished from others. We also confirmed that this piezoresistive cantilever-array sensor system has sub-ppm sensitivity.

  13. Fabrication Process for Cantilever Beam Micromechanical Switches

    DTIC Science & Technology

    1993-08-01

    Beam Design ................................................................... 13 B. Chemistry and Materials Used in Cantilever Beam Process...7 3. Photomask levels and composite...pp 410-413. 5 2. Cantilever Beam Fabrication Process The beam fabrication process incorporates four different photomasking levels with 62 processing

  14. MEMS Cantilever Sensor for THz Photoacoustic Chemical Sensing and Spectroscopy

    DTIC Science & Technology

    2013-12-26

    meaning the detector didn’t have to be cryogenically cooled. Piezoresistive cantilever style sensor designs have been fabricated for wind and...made a two cantilever pizeoresistive wind speed sensor that utilized a Wheatstone bridge configuration. The designed cantilevers, etched out of...Murakami et al. in Japan fabricated diaphragm and cantilever PZT microphone sensors for anomaly detection in machines such as turbines or engines

  15. Nonlinear Dynamics of Cantilever-Sample Interactions in Atomic Force Microscopy

    NASA Technical Reports Server (NTRS)

    Cantrell, John H.; Cantrell, Sean A.

    2010-01-01

    The interaction of the cantilever tip of an atomic force microscope (AFM) with the sample surface is obtained by treating the cantilever and sample as independent systems coupled by a nonlinear force acting between the cantilever tip and a volume element of the sample surface. The volume element is subjected to a restoring force from the remainder of the sample that provides dynamical equilibrium for the combined systems. The model accounts for the positions on the cantilever of the cantilever tip, laser probe, and excitation force (if any) via a basis set of set of orthogonal functions that may be generalized to account for arbitrary cantilever shapes. The basis set is extended to include nonlinear cantilever modes. The model leads to a pair of coupled nonlinear differential equations that are solved analytically using a matrix iteration procedure. The effects of oscillatory excitation forces applied either to the cantilever or to the sample surface (or to both) are obtained from the solution set and applied to the to the assessment of phase and amplitude signals generated by various acoustic-atomic force microscope (A-AFM) modalities. The influence of bistable cantilever modes of on AFM signal generation is discussed. The effects on the cantilever-sample surface dynamics of subsurface features embedded in the sample that are perturbed by surface-generated oscillatory excitation forces and carried to the cantilever via wave propagation are accounted by the Bolef-Miller propagating wave model. Expressions pertaining to signal generation and image contrast in A-AFM are obtained and applied to amplitude modulation (intermittent contact) atomic force microscopy and resonant difference-frequency atomic force ultrasonic microscopy (RDF-AFUM). The influence of phase accumulation in A-AFM on image contrast is discussed, as is the effect of hard contact and maximum nonlinearity regimes of A-AFM operation.

  16. Modular apparatus for electrostatic actuation of common atomic force microscope cantilevers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Long, Christian J., E-mail: christian.long@nist.gov; Maryland Nanocenter, University of Maryland, College Park, Maryland 20742; Cannara, Rachel J.

    2015-07-15

    Piezoelectric actuation of atomic force microscope (AFM) cantilevers often suffers from spurious mechanical resonances in the loop between the signal driving the cantilever and the actual tip motion. These spurious resonances can reduce the accuracy of AFM measurements and in some cases completely obscure the cantilever response. To address these limitations, we developed a specialized AFM cantilever holder for electrostatic actuation of AFM cantilevers. The holder contains electrical contacts for the AFM cantilever chip, as well as an electrode (or electrodes) that may be precisely positioned with respect to the back of the cantilever. By controlling the voltages on themore » AFM cantilever and the actuation electrode(s), an electrostatic force is applied directly to the cantilever, providing a near-ideal transfer function from drive signal to tip motion. We demonstrate both static and dynamic actuations, achieved through the application of direct current and alternating current voltage schemes, respectively. As an example application, we explore contact resonance atomic force microscopy, which is a technique for measuring the mechanical properties of surfaces on the sub-micron length scale. Using multiple electrodes, we also show that the torsional resonances of the AFM cantilever may be excited electrostatically, opening the door for advanced dynamic lateral force measurements with improved accuracy and precision.« less

  17. Magnetic force driven magnetoelectric effect in bi-cantilever composites

    NASA Astrophysics Data System (ADS)

    Zhang, Ru; Wu, Gaojian; Zhang, Ning

    2017-12-01

    The magnetic force driven magnetoelectric (ME) effect in bi-cantilever Mn-Zn-Ferrite /PZT composites is presented. Compared with single cantilever, the ME voltage coefficient in bi-cantilever composite is a little lower and the resonance frequency is higher, but the bi-cantilever structure is advantageous for integration. When the magnetic gap is 3 mm, the ME voltage coefficient can achieve 6.2 Vcm-1Oe-1 at resonance under optimum bias field Hm=1030 Oe; when the magnetic gap is 1.5 mm, the ME voltage coefficient can get the value as high as 4.4 Vcm-1Oe-1 under much lower bias field H=340 Oe. The stable ME effect in bi-cantilever composites has important potential application in the design of new type ME device.

  18. Drift study of SU8 cantilevers in liquid and gaseous environments.

    PubMed

    Tenje, Maria; Keller, Stephan; Dohn, Søren; Davis, Zachary J; Boisen, Anja

    2010-05-01

    We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

  19. Ultrananocrystalline Diamond Cantilever Wide Dynamic Range Acceleration/Vibration /Pressure Sensor

    DOEpatents

    Krauss, Alan R.; Gruen, Dieter M.; Pellin, Michael J.; Auciello, Orlando

    2003-09-02

    An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/V2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

  20. Ultrananocrystalline diamond cantilever wide dynamic range acceleration/vibration/pressure sensor

    DOEpatents

    Krauss, Alan R [Naperville, IL; Gruen, Dieter M [Downers Grove, IL; Pellin, Michael J [Naperville, IL; Auciello, Orlando [Bolingbrook, IL

    2002-07-23

    An ultrananocrystalline diamond (UNCD) element formed in a cantilever configuration is used in a highly sensitive, ultra-small sensor for measuring acceleration, shock, vibration and static pressure over a wide dynamic range. The cantilever UNCD element may be used in combination with a single anode, with measurements made either optically or by capacitance. In another embodiment, the cantilever UNCD element is disposed between two anodes, with DC voltages applied to the two anodes. With a small AC modulated voltage applied to the UNCD cantilever element and because of the symmetry of the applied voltage and the anode-cathode gap distance in the Fowler-Nordheim equation, any change in the anode voltage ratio V1/N2 required to maintain a specified current ratio precisely matches any displacement of the UNCD cantilever element from equilibrium. By measuring changes in the anode voltage ratio required to maintain a specified current ratio, the deflection of the UNCD cantilever can be precisely determined. By appropriately modulating the voltages applied between the UNCD cantilever and the two anodes, or limit electrodes, precise independent measurements of pressure, uniaxial acceleration, vibration and shock can be made. This invention also contemplates a method for fabricating the cantilever UNCD structure for the sensor.

  1. Analysis of photothermally induced vibration in metal coated AFM cantilever

    NASA Astrophysics Data System (ADS)

    Kadri, Shahrul; Fujiwara, Hideki; Sasaki, Keiji

    2010-05-01

    We report the vibration reduction in the optically driven V-shaped AFM cantilever with 70 nm gold surface coating. The driving laser at 780 nm is intensity modulated at 1 kHz to 100 kHz and focused on the AFM cantilever surface. The cantilever vibration amplitude is monitored by HeNe probe laser. Two features are observed: high vibration amplitude of the cantilever (1) at several kHz modulation frequencies regime and (2) at around its mechanical resonance. In addition, we found that vibration at the resonance peak increases when the excitation spot is positioned farther from the free end of the cantilever.

  2. Asymmetric resonance response analysis of a thermally excited silicon microcantilever for mass-sensitive nanoparticle detection

    NASA Astrophysics Data System (ADS)

    Bertke, Maik; Hamdana, Gerry; Wu, Wenze; Wasisto, Hutomo Suryo; Peiner, Erwin

    2017-06-01

    The asymmetric resonance responses of a thermally actuated silicon microcantilever of a portable, cantilever-based nanoparticle detector (Cantor) is analysed. For airborne nanoparticle concentration measurements, the cantilever is excited in its first in-plane bending mode by an integrated p-type heating actuator. The mass-sensitive nanoparticle (NP) detection is based on the resonance frequency (f0) shifting due to the deposition of NPs. A homemade phase-locked loop (PLL) circuit is developed for tracking of f0. For deflection sensing the cantilever contains an integrated piezo-resistive Wheatstone bridge (WB). A new fitting function based on the Fano resonance is proposed for analysing the asymmetric resonance curves including a method for calculating the quality factor Q from the fitting parameters. To obtain a better understanding, we introduce an electrical equivalent circuit diagram (ECD) comprising a series resonant circuit (SRC) for the cantilever resonator and voltage sources for the parasitics, which enables us to simulate the asymmetric resonance response and discuss the possible causes. Furthermore, we compare the frequency response of the on-chip thermal excitation with an external excitation using an in-plane piezo actuator revealing parasitic heating of the WB as the origin of the asymmetry. Moreover, we are able to model the phase component of the sensor output using the ECD. Knowing and understanding the phase response is crucial to the design of the PLL and thus the next generation of Cantor.

  3. Vertical electrostatic force in MEMS cantilever IR sensor

    NASA Astrophysics Data System (ADS)

    Rezadad, Imen; Boroumand Azad, Javaneh; Smith, Evan M.; Alhasan, Ammar; Peale, Robert E.

    2014-06-01

    A MEMS cantilever IR detector that repetitively lifts from the surface under the influence of a saw-tooth electrostatic force, where the contact duty cycle is a measure of the absorbed IR radiation, is analyzed. The design is comprised of three parallel conducting plates. Fixed buried and surface plates are held at opposite potential. A moveable cantilever is biased the same as the surface plate. Calculations based on energy methods with position-dependent capacity and electrostatic induction coefficients demonstrate the upward sign of the force on the cantilever and determine the force magnitude. 2D finite element method calculations of the local fields confirm the sign of the force and determine its distribution across the cantilever. The upward force is maximized when the surface plate is slightly larger than the other two. The electrostatic repulsion is compared with Casimir sticking force to determine the maximum useful contact area. MEMS devices were fabricated and the vertical displacement of the cantilever was observed in a number of experiments. The approach may be applied also to MEMS actuators and micromirrors.

  4. Self-heating in piezoresistive cantilevers

    PubMed Central

    Doll, Joseph C.; Corbin, Elise A.; King, William P.; Pruitt, Beth L.

    2011-01-01

    We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature. PMID:21731884

  5. Self-heating in piezoresistive cantilevers.

    PubMed

    Doll, Joseph C; Corbin, Elise A; King, William P; Pruitt, Beth L

    2011-05-30

    We report experiments and models of self-heating in piezoresistive microcantilevers that show how cantilever measurement resolution depends on the thermal properties of the surrounding fluid. The predicted cantilever temperature rise from a finite difference model is compared with detailed temperature measurements on fabricated devices. Increasing the fluid thermal conductivity allows for lower temperature operation for a given power dissipation, leading to lower force and displacement noise. The force noise in air is 76% greater than in water for the same increase in piezoresistor temperature.

  6. Cantilevers orthodontics forces measured by fiber sensors

    NASA Astrophysics Data System (ADS)

    Schneider, Neblyssa; Milczewski, Maura S.; de Oliveira, Valmir; Guariza Filho, Odilon; Lopes, Stephani C. P. S.; Kalinowski, Hypolito J.

    2015-09-01

    Fibers Bragg Gratings were used to evaluate the transmission of the forces generates by orthodontic mechanic based one and two cantilevers used to move molars to the upright position. The results showed levels forces of approximately 0,14N near to the root of the molar with one and two cantilevers.

  7. Effect of cantilever geometry on the optical lever sensitivities and thermal noise method of the atomic force microscope.

    PubMed

    Sader, John E; Lu, Jianing; Mulvaney, Paul

    2014-11-01

    Calibration of the optical lever sensitivities of atomic force microscope (AFM) cantilevers is especially important for determining the force in AFM measurements. These sensitivities depend critically on the cantilever mode used and are known to differ for static and dynamic measurements. Here, we calculate the ratio of the dynamic and static sensitivities for several common AFM cantilevers, whose shapes vary considerably, and experimentally verify these results. The dynamic-to-static optical lever sensitivity ratio is found to range from 1.09 to 1.41 for the cantilevers studied - in stark contrast to the constant value of 1.09 used widely in current calibration studies. This analysis shows that accuracy of the thermal noise method for the static spring constant is strongly dependent on cantilever geometry - neglect of these dynamic-to-static factors can induce errors exceeding 100%. We also discuss a simple experimental approach to non-invasively and simultaneously determine the dynamic and static spring constants and optical lever sensitivities of cantilevers of arbitrary shape, which is applicable to all AFM platforms that have the thermal noise method for spring constant calibration.

  8. Iron-platinum-coated carbon nanocone probes on tipless cantilevers for high resolution magnetic force imaging.

    PubMed

    Chen, I-Chen; Chen, Li-Han; Gapin, Andrew; Jin, Sungho; Yuan, Lu; Liou, Sy-Hwang

    2008-02-20

    High coercivity iron-platinum-coated carbon nanocones (CNCs) have been fabricated for magnetic force microscopy (MFM) by direct-current plasma-enhanced chemical vapor deposition growth of nanocones on tipless cantilevers followed by sputtering and annealing of the FePt film. The FePt-coated CNC probe has many localized magnetic stray fields due to the high-aspect-ratio geometry and small radius of the tip. The MFM imaging on magnetic recording media was performed using CNC probes and compared with the imaging by FePt-coated silicon probes. An image with 20 nm lateral resolution has been demonstrated.

  9. Fabrication and Characterization of Nanopillars for Silicon-Based Thermoelectrics

    NASA Astrophysics Data System (ADS)

    Stranz, A.; Sökmen, Ü.; Wehmann, H.-H.; Waag, A.; Peiner, E.

    2010-09-01

    Si-based nanopillars of various sizes were fabricated by lateral structuring using anisotropic etching and thermal oxidation. We obtained pillars of diameter <500 nm, about 25 μm in height, with an aspect ratio of more than 50. The distance between pillars was varied from 500 nm to 10 μm. Besides the fabrication and structural characterization of silicon nanopillars, implementation of adequate metrology for measuring single pillars is described. Commercial tungsten probes, self-made gold probes, and piezoresistive silicon cantilever probes were used for measurements of nanopillars in a scanning electron microscope (SEM) equipped with nanomanipulators.

  10. Enhancing amplitude changes by mode localization in trio cantilevers with mass perturbation

    NASA Astrophysics Data System (ADS)

    Wang, Dong F.; Li, Xiaodong; Yang, Xu; Ikehara, Tsuyoshi; Maeda, Ryutaro

    2015-09-01

    A simplified three-cantilever array was designed and micro-fabricated for demonstrating the response enhancement in amplitude changes when applying small mass perturbations. Three micro-cantilevers, defined as side (outermost) cantilever, center cantilever and another side cantilever, are identical in geometry and are connected micro-mechanically with each other by two coupling overhangs. In the case of analytical characterizations, by applying a picogram order mass perturbation (10 pg) on one side cantilever, significant enhancements in amplitude changes were obtained at the 2nd resonance mode from both of the unloaded cantilevers. The amplitude change from the center cantilever is about 7000 times higher than that with no mass perturbation, while the change in amplitude from another side cantilever is about 4000 times higher. In the aspect of experimental characterizations, the enhancement in amplitude change at the 2nd resonance mode was verified by applying two polystyrene micro-spheres (about 8.8 pg) as a picogram order mass perturbation onto one side cantilever. Due to the operational difficulties in quantitatively manipulating polystyrene micro-spheres, the effects of mass variations on the enhancement in amplitude changes from unloaded cantilevers were further analytically characterized under a range of 0.01-100 pg for three resonance modes respectively. This work is the first comparative study using three identical spring-mass beams on both analytical characterizations by applying small mass perturbations and sensing verification by manipulating a picogram polystyrene micro-sphere.

  11. Experimental confirmation of the atomic force microscope cantilever stiffness tilt correction

    NASA Astrophysics Data System (ADS)

    Gates, Richard S.

    2017-12-01

    The tilt angle (angle of repose) of an AFM cantilever relative to the surface it is interrogating affects the effective stiffness of the cantilever as it analyzes the surface. For typical AFMs and cantilevers that incline from 10° to 15° tilt, this is thought to be a 3%-7% stiffness increase correction. While the theoretical geometric analysis of this effect may have reached a consensus that it varies with cos-2 θ, there is very little experimental evidence to confirm this using AFM cantilevers. Recently, the laser Doppler vibrometry thermal calibration method utilized at NIST has demonstrated sufficient stiffness calibration accuracy, and precision to allow a definitive experimental confirmation of the particular trigonometric form of this tilt effect using a commercial microfabricated AFM cantilever specially modified to allow strongly tilted (up to 15°) effective cantilever stiffness measurements.

  12. Voltage generation of piezoelectric cantilevers by laser heating

    PubMed Central

    Hsieh, Chun-Yi; Liu, Wei-Hung; Chen, Yang-Fang; Shih, Wan Y.; Gao, Xiaotong; Shih, Wei-Heng

    2012-01-01

    Converting ambient thermal energy into electricity is of great interest in harvesting energy from the environment. Piezoelectric cantilevers have previously been shown to be an effective biosensor and a tool for elasticity mapping. Here we show that a single piezoelectric (lead-zirconate titanate (PZT)) layer cantilever can be used to convert heat to electricity through pyroelectric effect. Furthermore, piezoelectric-metal (PZT-Ti) bi-layer cantilever showed an enhanced induced voltage over the single PZT layer alone due to the additional piezoelectric effect. This type of device can be a way for converting heat energy into electricity. PMID:23258941

  13. Polymeric cantilever integrated with PDMS/graphene composite strain sensor.

    PubMed

    Choi, Young-Soo; Gwak, Min-Joo; Lee, Dong-Weon

    2016-10-01

    This paper describes the mechanical and electrical characteristics of a polydimethylsiloxane (PDMS) cantilever integrated with a high-sensitivity strain sensor. The strain sensor is fabricated using PDMS and graphene flakes that are uniformly distributed in the PDMS. In order to prepare PDMS/graphene composite with uniform resistance, a tetrahydrofuran solution is used to decrease the viscosity of a PDMS base polymer solution. A horn-type sonicator is then used to mix the base polymer with graphene flakes. Low viscosity of the base polymer solution improves the reliability and reproducibility of the PDMS/graphene composite for strain sensor applications. After dicing the composite into the desired sensor shape, a tensile test is performed. The experimental results show that the composite with a concentration of 30 wt.% exhibits a linear response up to a strain rate of 9%. The graphene concentration of the prepared materials affects the gauge factor, which at 20% graphene concentration reaches about 50, and with increasing graphene concentration to 30% decreases to 9. Furthermore, photolithography, PDMS casting, and a stencil process are used to fabricate a PDMS cantilever with an integrated strain sensor. The change in resistance of the integrated PDMS/graphene sensor is characterized with respect to the displacement of the cantilever of within 500 μm. The experimental results confirmed that the prepared PDMS/graphene based sensor has the potential for high-sensitive biosensor applications.

  14. Sensing cantilever beam bending by the optical lever technique and its application to surface stress.

    PubMed

    Evans, Drew R; Craig, Vincent S J

    2006-03-23

    Cantilever beams, both microscopic and macroscopic, are used as sensors in a great variety of applications. An optical lever system is commonly employed to determine the deflection and thereby the profile of the cantilever under load. The sensitivity of the optical lever must be calibrated, and this is usually achieved by application of a known load or deflection to the free end of the cantilever. When the sensing operation involves a different type of load or a combination of types of loadings, the calibration and the deflection values derived from it become invalid. Here we develop a master equation that permits the true deflection of the cantilever to be obtained simply from the measurement of the apparent deflection for uniformly distributed loadings and end-moment loadings. These loadings are relevant to the uniform adsorption or application of material to the cantilever or the application of a surface stress to the cantilever and should assist experimentalists using the optical lever, such as in the atomic force microscope, to measure cantilever deflections in a great variety of sensing applications. We then apply this treatment to the experimental evaluation of surface stress. Three forms of Stoney's equation that relate the apparent deflection to the surface stress, which is valid for both macroscopic and microscopic experiments, are derived. Analysis of the errors arising from incorrect modeling of the loading conditions of the cantilever currently applied in experiments is also presented. It is shown that the reported literature values for surface stress in microscopic experiments are typically 9% smaller than their true value. For macroscopic experiments, we demonstrate that the added mass of the film or coating generally dominates the measured deflection and must be accounted for accurately if surface stress measurements are to be made. Further, the reported measurements generally use a form of Stoney's equation that is in error, resulting in an

  15. Cantilever arrayed blood pressure sensor for arterial applanation tonometry.

    PubMed

    Lee, Byeungleul; Jeong, Jinwoo; Kim, Jinseok; Kim, Bonghwan; Chun, Kukjin

    2014-03-01

    The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-microm-thick-arrayed perforated membrane and 20-microm-thick metal pads. The length and the width of the unit membrane are 210 and 310 microm, respectively. The width of the insensible zone between the adjacent units is only 10 microm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg (= 120 kPa) and less than 1 mmHg (= 133.3 Pa), respectively.

  16. Dynamic response of a cracked atomic force microscope cantilever used for nanomachining

    PubMed Central

    2012-01-01

    The vibration behavior of an atomic force microscope [AFM] cantilever with a crack during the nanomachining process is studied. The cantilever is divided into two segments by the crack, and a rotational spring is used to simulate the crack. The two individual governing equations of transverse vibration for the cracked cantilever can be expressed. However, the corresponding boundary conditions are coupled because of the crack interaction. Analytical expressions for the vibration displacement and natural frequency of the cracked cantilever are obtained. In addition, the effects of crack flexibility, crack location, and tip length on the vibration displacement of the cantilever are analyzed. Results show that the crack occurs in the AFM cantilever that can significantly affect its vibration response. PACS: 07.79.Lh; 62.20.mt; 62.25.Jk PMID:22335820

  17. Dynamic characterization of small fibers based on the flexural vibrations of a piezoelectric cantilever probe

    NASA Astrophysics Data System (ADS)

    Zhang, Xiaofei; Ye, Xuan; Li, Xide

    2016-08-01

    In this paper, we present a cantilever-probe system excited by a piezoelectric actuator, and use it to measure the dynamic mechanical properties of a micro- and nanoscale fiber. Coupling the fiber to the free end of the cantilever probe, we found the dynamic stiffness and damping coefficient of the fiber from the resonance frequency and the quality factor of the fiber-cantilever-probe system. The properties of Bacillus subtilis fibers measured using our proposed system agreed with tensile measurements, validating our method. Our measurements show that the piezoelectric actuator coupled to cantilever probe can be made equivalent to a clamped cantilever with an effective length, and calculated results show that the errors of measured natural frequency of the system can be ignored if the coupled fiber has an inclination angle of alignment of less than 10°. A sensitivity analysis indicates that the first or second resonant mode is the sensitive mode to test the sample’s dynamic stiffness, while the damping property has different sensitivities for the first four modes. Our theoretical analysis demonstrates that the double-cantilever probe is also an effective sensitive structure that can be used to perform dynamic loading and characterize dynamic response. Our method has the advantage of using amplitude-frequency curves to obtain the dynamic mechanical properties without directly measuring displacements and forces as in tensile tests, and it also avoids the effects of the complex surface structure and deformation presenting in contact resonance method. Our method is effective for measuring the dynamic mechanical properties of fiber-like one-dimensional (1D) materials.

  18. Young's modulus measurement of aluminum thin film with cantilever structure

    NASA Astrophysics Data System (ADS)

    Lee, ByoungChan; Lee, SangHun; Lee, Hwasu; Shin, Hyungjae

    2001-09-01

    Micromachined cantilever structures are commonly used for measuring mechanical properties of thin film materials in MEMS. The application of conventional cantilever theory in experiment raises severe problem. The deformation of the supporting post and flange is produced by the applied electrostatic force and lead to more reduced measurement value than real Young's modulus of thin film materials. In order to determine Young's modulus of aluminum thin film robustly and reproducibly, the modified cantilever structure is proposed. Two measurement methods, which are cantilever tip deflection measurement and resonant frequency measurement, are used for confirming the reliability of the proposed cantilever structure as well. Measured results indicate that the proposed measurement scheme provides useful and credible Young's modulus value for thin film materials with sub-micron thickness. The proved validation of the proposed scheme makes sure that in addition to Young's modulus of aluminum thin film, that of other thin film materials which are aluminum alloy, metal, and so forth, can be extracted easily and clearly.

  19. Multi-directional energy harvesting by piezoelectric cantilever-pendulum with internal resonance

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Xu, J.; Tang, J., E-mail: jtang@engr.uconn.edu

    This letter reports a piezoelectric cantilever-pendulum design for multi-directional energy harvesting. A pendulum is attached to the tip of a piezoelectric cantilever-type energy harvester. This design aims at taking advantage of the nonlinear coupling between the pendulum motion in 3-dimensional space and the beam bending vibration at resonances. Experimental studies indicate that, under properly chosen parameters, 1:2 internal resonance can be induced, which enables the multi-directional energy harvesting with a single cantilever. The advantages of the design with respect to traditional piezoelectric cantilever are examined.

  20. Note: Spring constant calibration of nanosurface-engineered atomic force microscopy cantilevers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Ergincan, O., E-mail: orcunergincan@gmail.com; Palasantzas, G.; Kooi, B. J.

    2014-02-15

    The determination of the dynamic spring constant (k{sub d}) of atomic force microscopy cantilevers is of crucial importance for converting cantilever deflection to accurate force data. Indeed, the non-destructive, fast, and accurate measurement method of the cantilever dynamic spring constant by Sader et al. [Rev. Sci. Instrum. 83, 103705 (2012)] is confirmed here for plane geometry but surface modified cantilevers. It is found that the measured spring constants (k{sub eff}, the dynamic one k{sub d}), and the calculated (k{sub d,1}) are in good agreement within less than 10% error.

  1. Note: Simultaneous determination of local temperature and thickness of heated cantilevers using two-wavelength thermoreflectance.

    PubMed

    Park, Heeseung; Lee, Bong Jae; Lee, Jungchul

    2014-03-01

    In this work, we have demonstrated that two-wavelength thermoreflectance technique can be used to characterize the local thickness and temperature of heated cantilevers at steady-state operation. By taking the ratio of reflectances for two lasers with different wavelengths, the geometrical factor causing the mismatch between experimentally measured and theoretically calculated reflectances was eliminated. Based on the fitting analysis of the reflectance ratio of two wavelengths at various input powers to the heated cantilevers, the local temperature and thickness could be unambiguously determined.

  2. Innovative multi-cantilever array sensor system with MOEMS read-out

    NASA Astrophysics Data System (ADS)

    Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

    2016-11-01

    Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

  3. Use of cantilever mechanics for impacted teeth: case series.

    PubMed

    Paduano, Sergio; Spagnuolo, Gianrico; Franzese, Gerardo; Pellegrino, Gioacchino; Valletta, Rosa; Cioffi, Iacopo

    2013-01-01

    This paper describes the orthodontic treatment, and the biomechanics of cantilevers for the impaction of permanent teeth in youngs, adolescents, and adults. In these case series, multibracket straightwire fixed appliances, together with cantilever mechanics, were used to treat the impaired occlusion.

  4. Piezoresistive cantilever array sensor for consolidated bioprocess monitoring

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Kim, Seonghwan Sam; Rahman, Touhidur; Senesac, Larry R

    2009-01-01

    Cellulolytic microbes occur in diverse natural niches and are being screened for industrial modification and utility. A microbe for Consolidated bioprocessing (CBP) development can rapidly degrade pure cellulose and then ferment the resulting sugars into fuels. To identify and screen for novel microbes for CBP, we have developed a piezoresistive cantilever array sensor which is capable of simultaneous monitoring of glucose and ethanol concentration changes in a phosphate buffer solution. 4-mercaptophenylboronic acid (4-MPBA) and polyethyleneglycol (PEG)-thiol are employed to functionalize each piezoresistive cantilever for glucose and ethanol sensing, respectively. Successful concentration measurements of glucose and ethanol with minimal interferences aremore » obtained with our cantilever array sensor.« less

  5. Cost-effective MEMS piezoresistive cantilever-based sensor fabrication for gait movement analysis

    NASA Astrophysics Data System (ADS)

    Saadon, Salem; Anuar, A. F. M.; Wahab, Yufridin

    2017-03-01

    The conventional photolithography of crystalline silicon technique is limited to two-dimensional and structure scaling. It's also requiring a lot of time and chemical involves for the whole process. These problems can be overcome by using laser micromachining technique, that capable to produce three-dimensional structure and simultaneously avoiding the photo mask needs. In this paper, we reported on the RapidX-250 Excimer laser micromachining with 248 nm KrF to create in-time mask design and assisting in the fabrication process of piezo-resistive micro cantilever structures. Firstly, laser micromachining parameters have been investigated in order to fabricate the acceleration sensor to analyzing human gait movement. Preliminary result shows that the fabricated sensor able to define the movement difference of human motion regarding the electrical characteristic of piezo-resistor.

  6. Silicon micromachined pumps employing piezoelectric membrane actuation for microfluidic systems

    NASA Astrophysics Data System (ADS)

    Koch, Michael

    Microsystems technology is a rapidly expanding area that comprises electronics, mechanics and optics. In this field, physical/chemical sensing, fluid handling and optical communication are emerging as potential markets. Microfluidic systems like an implantable insulin pump, a drug delivery system and a total chemical analysis system are currently being developed by academia and industry around the world. This project contributes to the area of microfluidics in that a novel thick-film-on-silicon membrane actuator has been developed to allow inexpensive mass production of micropumps. To date piezoelectric plates have been surface mounted onto a silicon membrane. This single chip fabrication method can now be replaced by screen printing thick piezoelectric layers onto 4 inch silicon substrates. Two different pump types have been developed. These are membrane pumps with either cantilever valves or diffuser/nozzle valves. Pump rates between 100 and 200 μl min-1 and backpressures up to 4 kPa have been achieved with these pumps. Along with the technology of micropumps, simulators have been developed. A novel coupled FEM-CFD solver was realised by a computer controlled coupling of two commercially available packages (ANSYS and CFX-Flow3D). The results of this simulator were in good agreement with measurements on micromachined cantilever valves. CFX- Flow3D was also used to successfully model the behaviour of the diffuser/nozzle valve. Finally, the pump has been simulated using a continuity equation. A behavioural dynamic extension of the cantilever valve was necessary to achieve better prediction of the pump rates for higher frequencies. As well, a common process has been developed for microfluidic devices like micromixers, particle counters and sorters as well as flow sensors. The micromixer has been tested already and achieves mixing for input pressures between 2 and 7 kPa. This agrees with simulations of the diffusive mixing with CFX-Flow3D. Together with the micropump

  7. Use of Cantilever Mechanics for Impacted Teeth: Case Series

    PubMed Central

    Paduano, Sergio; Spagnuolo, Gianrico; Franzese, Gerardo; Pellegrino, Gioacchino; Valletta, Rosa; Cioffi, Iacopo

    2013-01-01

    This paper describes the orthodontic treatment, and the biomechanics of cantilevers for the impaction of permanent teeth in youngs, adolescents, and adults. In these case series, multibracket straightwire fixed appliances, together with cantilever mechanics, were used to treat the impaired occlusion. PMID:24511332

  8. A calibration method for the higher modes of a micro-mechanical cantilever

    NASA Astrophysics Data System (ADS)

    Shatil, N. R.; Homer, M. E.; Picco, L.; Martin, P. G.; Payton, O. D.

    2017-05-01

    Micro-mechanical cantilevers are increasingly being used as a characterisation tool in both material and biological sciences. New non-destructive applications are being developed that rely on the information encoded within the cantilever's higher oscillatory modes, such as atomic force microscopy techniques that measure the non-topographic properties of a sample. However, these methods require the spring constants of the cantilever at higher modes to be known in order to quantify their results. Here, we show how to calibrate the micro-mechanical cantilever and find the effective spring constant of any mode. The method is uncomplicated to implement, using only the properties of the cantilever and the fundamental mode that are straightforward to measure.

  9. Stochastic resonance in micro/nano cantilever sensors

    NASA Astrophysics Data System (ADS)

    Singh, Priyanka; Yadava, R. D. S.

    2018-05-01

    In this paper we present a comparative study on the stochastic resonance in micro/nano cantilever resonators due to fluctuations in the fundamental frequency or the damping coefficient. Considering DC+AC electrostatic actuation in the presence of zero-mean Gaussian noise with exponential autocorrelation we analyze stochastic resonance behaviors for the frequency and the damping fluctuations separately, and compare the effects of stochastic resonance on Q-factor of the resonators for different levels of damping losses. It is found that even though the stochastic resonance occurs for both types of fluctuations, only the damping fluctuation produces right cooperative influence on the fundamental resonance that improves both the amplitude response and the quality factor of the resonator.

  10. Efficiency Enhancement of a Cantilever-Based Vibration Energy Harvester

    PubMed Central

    Kubba, Ali E.; Jiang, Kyle

    2014-01-01

    Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM) applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA) was used as an initial tool to compare the three geometries' stiffness (K), output open-circuit voltage (Vave), and average normal strain in the piezoelectric transducer (εave) that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3), has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle). PMID:24366177

  11. Efficiency enhancement of a cantilever-based vibration energy harvester.

    PubMed

    Kubba, Ali E; Jiang, Kyle

    2013-12-23

    Extracting energy from ambient vibration to power wireless sensor nodes has been an attractive area of research, particularly in the automotive monitoring field. This article reports the design, analysis and testing of a vibration energy harvesting device based on a miniature asymmetric air-spaced cantilever. The developed design offers high power density, and delivers electric power that is sufficient to support most wireless sensor nodes for structural health monitoring (SHM) applications. The optimized design underwent three evolutionary steps, starting from a simple cantilever design, going through an air-spaced cantilever, and ending up with an optimized air-spaced geometry with boosted power density level. Finite Element Analysis (FEA) was used as an initial tool to compare the three geometries' stiffness (K), output open-circuit voltage (V(ave)), and average normal strain in the piezoelectric transducer (ε(ave)) that directly affect its output voltage. Experimental tests were also carried out in order to examine the energy harvesting level in each of the three designs. The experimental results show how to boost the power output level in a thin air-spaced cantilever beam for energy within the same space envelope. The developed thin air-spaced cantilever (8.37 cm3), has a maximum power output of 2.05 mW (H = 29.29 μJ/cycle).

  12. Analysis of wood cantilever loaded at free end

    Treesearch

    Jen Y. Liu; Douglas R. Rammer

    2003-01-01

    A wood cantilever loaded at the free end was analyzed using the anisotropic elasticity theory. This report presents a two-dimensional numerical example of a Sitka spruce cantilever in the longitudinal-radial plane. When the grain slope is zero, ie., the beam axis coincides with the longitudinal axis of wood, the stresses in the beam and the deflection of the beam are...

  13. Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles

    NASA Astrophysics Data System (ADS)

    Korayem, M. H.; Taheri, M.; Ghahnaviyeh, S. D.

    2015-08-01

    Due to the more delicate nature of biological micro/nanoparticles, it is necessary to compute the critical force of manipulation. The modeling and simulation of reactions and nanomanipulator dynamics in a precise manipulation process require an exact modeling of cantilevers stiffness, especially the stiffness of dagger cantilevers because the previous model is not useful for this investigation. The stiffness values for V-shaped cantilevers can be obtained through several methods. One of them is the PBA method. In another approach, the cantilever is divided into two sections: a triangular head section and two slanted rectangular beams. Then, deformations along different directions are computed and used to obtain the stiffness values in different directions. The stiffness formulations of dagger cantilever are needed for this sensitivity analyses so the formulations have been driven first and then sensitivity analyses has been started. In examining the stiffness of the dagger-shaped cantilever, the micro-beam has been divided into two triangular and rectangular sections and by computing the displacements along different directions and using the existing relations, the stiffness values for dagger cantilever have been obtained. In this paper, after investigating the stiffness of common types of cantilevers, Sobol sensitivity analyses of the effects of various geometric parameters on the stiffness of these types of cantilevers have been carried out. Also, the effects of different cantilevers on the dynamic behavior of nanoparticles have been studied and the dagger-shaped cantilever has been deemed more suitable for the manipulation of biological particles.

  14. Bi-harmonic cantilever design for improved measurement sensitivity in tapping-mode atomic force microscopy.

    PubMed

    Loganathan, Muthukumaran; Bristow, Douglas A

    2014-04-01

    This paper presents a method and cantilever design for improving the mechanical measurement sensitivity in the atomic force microscopy (AFM) tapping mode. The method uses two harmonics in the drive signal to generate a bi-harmonic tapping trajectory. Mathematical analysis demonstrates that the wide-valley bi-harmonic tapping trajectory is as much as 70% more sensitive to changes in the sample topography than the standard single-harmonic trajectory typically used. Although standard AFM cantilevers can be driven in the bi-harmonic tapping trajectory, they require large forcing at the second harmonic. A design is presented for a bi-harmonic cantilever that has a second resonant mode at twice its first resonant mode, thereby capable of generating bi-harmonic trajectories with small forcing signals. Bi-harmonic cantilevers are fabricated by milling a small cantilever on the interior of a standard cantilever probe using a focused ion beam. Bi-harmonic drive signals are derived for standard cantilevers and bi-harmonic cantilevers. Experimental results demonstrate better than 30% improvement in measurement sensitivity using the bi-harmonic cantilever. Images obtained through bi-harmonic tapping exhibit improved sharpness and surface tracking, especially at high scan speeds and low force fields.

  15. 2. DETAIL OF STRUCTURAL SYSTEM FOR CANTILEVERED HOG RUN; BUILDING ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    2. DETAIL OF STRUCTURAL SYSTEM FOR CANTILEVERED HOG RUN; BUILDING 168 (1960 HOG KILL) IS BENEATH HOG RUN - Rath Packing Company, Cantilevered Hog Run, Sycamore Street between Elm & Eighteenth Streets, Waterloo, Black Hawk County, IA

  16. The stability of a flexible cantilever in viscous channel flow

    NASA Astrophysics Data System (ADS)

    Cisonni, Julien; Lucey, Anthony D.; Elliott, Novak S. J.; Heil, Matthias

    2017-05-01

    Most studies of the flow-induced flutter instability of a flexible cantilever have assumed inviscid flow because of the high flow speeds and the large scale of the structures encountered in the wide range of applications of this fluid-structure interaction (FSI) system. However, for instance, in the fields of energy harvesting and biomechanics, low flow speeds and small- and micro-scale systems can give relatively low Reynolds numbers so that fluid viscosity needs to be explicitly accounted for to provide reliable predictions of channel-immersed-cantilever stability. In this study, we employ a numerical model coupling the Navier-Stokes equations and a one-dimensional elastic beam model. We conduct a parametric investigation to determine the conditions leading to flutter instability of a slender flexible cantilever immersed in two-dimensional viscous channel flow for Reynolds numbers lower than 1000. The large set of numerical simulations carried out allows predictions of the influence of decreasing Reynolds numbers and of the cantilever confinement on the single-mode neutral stability of the FSI system and on the pre- and post-critical cantilever motion. This model's predictions are also compared to those of a FSI model containing a two-dimensional solid model in order to assess, primarily, the effect of the cantilever slenderness in the simulations. Results show that an increasing contribution of viscosity to the hydrodynamic forces significantly alters the instability boundaries. In general, a decrease in Reynolds number is predicted to produce a stabilisation of the FSI system, which is more pronounced for high fluid-to-solid mass ratios. For particular fluid-to-solid mass ratios, viscous effects can lower the critical velocity and lead to a change in the first unstable structural mode. However, at constant Reynolds number, the effects of viscosity on the system stability are diminished by the confinement of the cantilever, which strengthens the importance of

  17. A Low Temperature Scanning Force Microscope with a Vertical Cantilever and Interferometric Detection Scheme

    NASA Astrophysics Data System (ADS)

    Kim, Jeehoon; Williams, T. L.; Chu, Sang Lin; Korre, Hasan; Chalfin, Max; Hoffman, J. E.

    2008-03-01

    We have developed a fiber-optic interferometry system with a vertical cantilever for scanning force microscopy. A lens, mounted on a Pan-type walker, was used to collect the interference signal in the cavity between the cantilever and the single mode fiber. This vertical geometry has several advantages: (1) it is directly sensitive to lateral forces; (2) low spring constant vertical cantilevers may allow increased force sensitivity by solving the ``snap-in'' problem that occurs with soft horizontal cantilevers. We have sharpened vertical cantilevers by focused ion beam (FIB), achieving a tip radius of 20 nm. We will show test results of a magnetic force microscope (MFM) with this vertical cantilever system.

  18. Detection of atomic force microscopy cantilever displacement with a transmitted electron beam

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wagner, R.; Woehl, T. J.; Keller, R. R.

    2016-07-25

    The response time of an atomic force microscopy (AFM) cantilever can be decreased by reducing cantilever size; however, the fastest AFM cantilevers are currently nearing the smallest size that can be detected with the conventional optical lever approach. Here, we demonstrate an electron beam detection scheme for measuring AFM cantilever oscillations. The oscillating AFM tip is positioned perpendicular to and in the path of a stationary focused nanometer sized electron beam. As the tip oscillates, the thickness of the material under the electron beam changes, causing a fluctuation in the number of scattered transmitted electrons that are detected. We demonstratemore » detection of sub-nanometer vibration amplitudes with an electron beam, providing a pathway for dynamic AFM with cantilevers that are orders of magnitude smaller and faster than the current state of the art.« less

  19. Label-free protein assay based on a nanomechanical cantilever array

    NASA Astrophysics Data System (ADS)

    Arntz, Y.; Seelig, J. D.; Lang, H. P.; Zhang, J.; Hunziker, P.; Ramseyer, J. P.; Meyer, E.; Hegner, M.; Gerber, Ch

    2003-01-01

    We demonstrate continuous label-free detection of two cardiac biomarker proteins (creatin kinase and myoglobin) using an array of microfabricated cantilevers functionalized with covalently anchored anti-creatin kinase and anti-myoglobin antibodies. This method allows biomarker proteins to be detected via measurement of surface stress generated by antigen-antibody molecular recognition. Reference cantilevers are used to eliminate thermal drifts, undesired chemical reactions and turbulences from injections of liquids by calculating differential deflection signals with respect to sensor cantilevers. The sensitivity achieved for myoglobin detection is below 20 µg ml-1. Both myoglobin and creatin kinase could be detected independently using cantilevers functionalized with the corresponding antibodies, in unspecific protein background. This approach permits the use of up to seven different antigen-antibody reactions simultaneously, including an additional thermomechanical and chemical in situ reference. Applications lie in the field of early and rapid diagnosis of acute myocardial infarction.

  20. Note: A resonating reflector-based optical system for motion measurement in micro-cantilever arrays

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Sathishkumar, P.; Punyabrahma, P.; Sri Muthu Mrinalini, R.

    A robust, compact optical measurement unit for motion measurement in micro-cantilever arrays enables development of portable micro-cantilever sensors. This paper reports on an optical beam deflection-based system to measure the deflection of micro-cantilevers in an array that employs a single laser source, a single detector, and a resonating reflector to scan the measurement laser across the array. A strategy is also proposed to extract the deflection of individual cantilevers from the acquired data. The proposed system and measurement strategy are experimentally evaluated and demonstrated to measure motion of multiple cantilevers in an array.

  1. Large Area Microcorrals and Cavity Formation on Cantilevers using a Focused Ion Beam

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Saraf, Laxmikant V.; Britt, David W.

    2011-09-14

    We utilize focused ion beam (FIB) to explore various sputtering parameters to form large area microcorrals and cavities on cantilevers. Microcorrals were rapidly created by modifying ion beam blur and overlaps. Modification in FIB sputtering parameters affects the periodicity and shape of corral microstructure. Cantilever deflections show ion beam amorphization effects as a function of sputtered area and cantilever base cavities with or without side walls. The FIB sputtering parameters address a method for rapid creation of a cantilever tensiometer with integrated fluid storage and delivery.

  2. Computer aided design of Langasite resonant cantilevers: analytical models and simulations

    NASA Astrophysics Data System (ADS)

    Tellier, C. R.; Leblois, T. G.; Durand, S.

    2010-05-01

    Analytical models for the piezoelectric excitation and for the wet micromachining of resonant cantilevers are proposed. Firstly, computations of metrological performances of micro-resonators allow us to select special cuts and special alignment of the cantilevers. Secondly the self-elaborated simulator TENSOSIM based on the kinematic and tensorial model furnishes etching shapes of cantilevers. As the result the number of selected cuts is reduced. Finally the simulator COMSOL® is used to evaluate the influence of final etching shape on metrological performances and especially on the resonance frequency. Changes in frequency are evaluated and deviating behaviours of structures with less favourable built-ins are tested showing that the X cut is the best cut for LGS resonant cantilevers vibrating in flexural modes (type 1 and type 2) or in torsion mode.

  3. Investigations on antibody binding to a micro-cantilever coated with a BAM pesticide residue.

    PubMed

    Bache, Michael; Taboryski, Rafael; Schmid, Silvan; Aamand, Jens; Jakobsen, Mogens Havsteen

    2011-05-16

    The attachment of an antibody to an antigen-coated cantilever has been investigated by repeated experiments, using a cantilever-based detection system by Cantion A/S. The stress induced by the binding of a pesticide residue BAM (2,6 dichlorobenzamide) immobilized on a cantilever surface to anti-BAM antibody is measured using the CantiLab4© system from Cantion A/S with four gold-coated cantilevers and piezo resistive readout. The detection mechanism is in principle label-free, but fluorescent-marked antibodies have been used to subsequently verify the binding on the cantilever surface. The bending and increase in mass of each cantilever has also been investigated using a light interferometer and a Doppler Vibrometer. The system has been analyzed during repeated measurements to investigate whether the CantiLab4© system is a suited platform for a pesticide assay system.

  4. Regulation of Transforming Growth Factor β1, Platelet-Derived Growth Factor, and Basic Fibroblast Growth Factor by Silicone Gel Sheeting in Early-Stage Scarring.

    PubMed

    Choi, Jaehoon; Lee, Eun Hee; Park, Sang Woo; Chang, Hak

    2015-01-01

    Hypertrophic scars and keloids are associated with abnormal levels of growth factors. Silicone gel sheets are effective in treating and preventing hypertrophic scars and keloids. There has been no report on the change in growth factors in the scar tissue following the use of silicone gel sheeting for scar prevention. A prospective controlled trial was performed to evaluate whether growth factors are altered by the application of a silicone gel sheet on a fresh surgical scar. Four of seven enrolled patients completed the study. Transforming growth factor (TGF)-β1, platelet-derived growth factor (PDGF), and basic fibroblast growth factor (bFGF) were investigated immunohistochemically in biopsies taken from five scars at 4 months following surgery. In both the epidermis and the dermis, the expression of TGF-β1 (P=0.042 and P=0.042) and PDGF (P=0.043 and P=0.042) was significantly lower in the case of silicone gel sheet-treated scars than in the case of untreated scars. The expression of bFGF in the dermis was significantly higher in the case of silicone gel sheet-treated scars than in the case of untreated scars (P=0.042), but in the epidermis, the expression of bFGF showed no significant difference between the groups (P=0.655). The levels of TGF-β1, PDGF, and bFGF are altered by the silicone gel sheet treatment, which might be one of the mechanisms of action in scar prevention.

  5. 11. VIEW, LOOKING SOUTHEAST, ALONG CENTERLINE FROM SOUTH CANTILEVER TOWARD ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    11. VIEW, LOOKING SOUTHEAST, ALONG CENTERLINE FROM SOUTH CANTILEVER TOWARD TOWARD NORTH PORTAL. Note vertical displacement in deck caused by partial collapse at point of connection between south cantilever arm and suspended span. - Smith River Bridge, CA State Highway 199 Spanning Smith River, Crescent City, Del Norte County, CA

  6. The importance of cantilever dynamics in the interpretation of Kelvin probe force microscopy.

    PubMed

    Satzinger, Kevin J; Brown, Keith A; Westervelt, Robert M

    2012-09-15

    A realistic interpretation of the measured contact potential difference (CPD) in Kelvin probe force microscopy (KPFM) is crucial in order to extract meaningful information about the sample. Central to this interpretation is a method to include contributions from the macroscopic cantilever arm, as well as the cone and sharp tip of a KPFM probe. Here, three models of the electrostatic interaction between a KPFM probe and a sample are tested through an electrostatic simulation and compared with experiment. In contrast with previous studies that treat the KPFM cantilever as a rigid object, we allow the cantilever to bend and rotate; accounting for cantilever bending provides the closest agreement between theory and experiment. We demonstrate that cantilever dynamics play a major role in CPD measurements and provide a simulation technique to explore this phenomenon.

  7. Low temperature coefficient of resistance and high gage factor in beryllium-doped silicon

    NASA Technical Reports Server (NTRS)

    Robertson, J. B.; Littlejohn, M. A.

    1974-01-01

    The gage factor and resistivity of p-type silicon doped with beryllium was studied as a function of temperature, crystal orientation, and beryllium doping concentration. It was shown that the temperature coefficient of resistance can be varied and reduced to zero near room temperature by varying the beryllium doping level. Similarly, the magnitude of the piezoresistance gage factor for beryllium-doped silicon is slightly larger than for silicon doped with a shallow acceptor impurity such as boron, whereas the temperature coefficient of piezoresistance is about the same for material containing these two dopants. These results are discussed in terms of a model for the piezoresistance of compensated p-type silicon.

  8. Three-electrode self-actuating self-sensing quartz cantilever: design, analysis, and experimental verification.

    PubMed

    Chen, C Julian; Schwarz, Alex; Wiesendanger, Roland; Horn, Oliver; Müller, Jörg

    2010-05-01

    We present a novel quartz cantilever for frequency-modulation atomic force microscopy (FM-AFM) which has three electrodes: an actuating electrode, a sensing electrode, and a ground electrode. By applying an ac signal on the actuating electrode, the cantilever is set to vibrate. If the frequency of actuation voltage closely matches one of the characteristic frequencies of the cantilever, a sharp resonance should be observed. The vibration of the cantilever in turn generates a current on the sensing electrode. The arrangement of the electrodes is such that the cross-talk capacitance between the actuating electrode and the sensing electrode is less than 10(-16) F, thus the direct coupling is negligible. To verify the principle, a number of samples were made. Direct measurements with a Nanosurf easyPPL controller and detector showed that for each cantilever, one or more vibrational modes can be excited and detected. Using classical theory of elasticity, it is shown that such novel cantilevers with proper dimensions can provide optimized performance and sensitivity in FM-AFM with very simple electronics.

  9. Design and fabrication of a PZT cantilever for low frequency vibration energy harvesting.

    PubMed

    Kim, Moonkeun; Hwang, Beomseok; Min, Nam Ki; Jeong, Jaehwa; Kwon, Kwang-Ho; Park, Kang-Bak

    2011-07-01

    In this study, a PZT cantilever with a Si proof mass is designed and fabricated for a low frequency energy harvesting application. A mathematical model of a multi-layer composite beam was derived and applied in a parametric analysis of the piezoelectric cantilever. Finally, the dimensions of the cantilever were determined for the resonant frequency of the cantilever. Our cantilever design was based on MATLAB and ANSYS simulations. For this simulation, the proof mass volumes were varied from 0 to 0.5 mm3 and resonant frequencies were calculated from 833.5 Hz to 125.5 Hz, respectively. Based on simulation, we fabricated a device with beam dimensions of about 4.10 mm x 0.48 mm x 0.012 mm, and an integrated Si proof mass with dimensions of about 0.481 mm x 0.48 mm x 0.45 mm. The resonant frequency, maximum peak voltage, and highest average power of the cantilever device were 224.8 Hz, 4.8 mV, and 2.24 nW, respectively.

  10. MicroCantilever (MC) based nanomechanical sensor for detection of molecular interactions

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Kang, Kyung

    Specific aims of this study are to investigate the mechanism governing surface stress generation associated with chemical or molecular binding on functionalized microcantilevers. Formation of affinity complexes on cantilever surfaces leads to charge redistribution, configurational change and steric hindrance between neighboring molecules resulting in surface stress change and measureable cantilever deformation. A novel interferometry technique employing two adjacent micromachined cantilevers (a sensing/reference pair) was utilized to measure the cantilever deformation. The sensing principle is that binding/reaction of specific chemical or biological species on the sensing cantilever transduces to mechanical deformation. The differential bending of the sensing cantilever respect to themore » reference cantilever ensures that measured response is insensitive to environmental disturbances. As a proof of principle for the measurement technique, surface stress changes associated with: self-assembly of alkanethiol, hybridization of ssDNA, and the formation of cocaine-aptamer complexes were measured. Dissociation constant (K d) for each molecular reaction was utilized to estimate the surface coverage of affinity complexes. In the cases of DNA hybridization and cocaine-aptamer binding, measured surface stress was found to be dependent on the surface coverage of the affinity complexes. In order to achieve a better sensitivity for DNA hybridization, immobilization of receptor molecules was modified to enhance the deformation of underlying surface. Single-stranded DNA (ssDNA) strands with thiol-modification on both 3-foot and 5-foot ends were immobilized on the gold surface such that both ends are attached to the gold surface. Immobilization condition was controlled to obtain similar receptor density as single-thiolated DNA strands. Hybridization of double-thiolated DNA strands leads to an almost two orders of magnitude increase in cantilever deformation. In both DNA

  11. Improved Noninterferometric Test of Collapse Models Using Ultracold Cantilevers

    NASA Astrophysics Data System (ADS)

    Vinante, A.; Mezzena, R.; Falferi, P.; Carlesso, M.; Bassi, A.

    2017-09-01

    Spontaneous collapse models predict that a weak force noise acts on any mechanical system, as a consequence of the collapse of the wave function. Significant upper limits on the collapse rate have been recently inferred from precision mechanical experiments, such as ultracold cantilevers and the space mission LISA Pathfinder. Here, we report new results from an experiment based on a high-Q cantilever cooled to millikelvin temperatures, which is potentially able to improve the current bounds on the continuous spontaneous localization (CSL) model by 1 order of magnitude. High accuracy measurements of the cantilever thermal fluctuations reveal a nonthermal force noise of unknown origin. This excess noise is compatible with the CSL heating predicted by Adler. Several physical mechanisms able to explain the observed noise have been ruled out.

  12. The study of micro-inextensible piezoelectric cantilever plate

    NASA Astrophysics Data System (ADS)

    Chen, L. H.; Xu, J. W.; Zhang, W.

    2018-06-01

    In this paper, a micro-inextensible piezoelectric cantilever plate is analyzed and its nonlinear dynamic behaviour is studied. The nonlinear oscillation differential equation is established by using Hamilton’s principle with the application of strain gradient theory to consider the size effect, and inextensible theory to consider the large deformation and rotation effect of cantilever plate. Based on MATLAB software, using the Runge-Kuta method, we can obtain the response of the nonlinear oscillation differential equation. The influences of the strain gradient length scale parameter and voltage on the dynamic response of micro piezoelectric cantilever plate are investigated separately. The results confirmed an increase of the stiffness of the system by using the strain gradient theory and the amplitude of the vibration is reduced. The vibration of the system can be controlled by applying an active voltage. The effect of external excitation frequency on nonlinear dynamic behaviour is considered by using Poincare surface of section and diagrams of waveforms, phase and bifurcation.

  13. Intermittent impact dynamics of a cantilever scanning a surface at high speed

    NASA Astrophysics Data System (ADS)

    Dey, S.; Kartik, V.

    2018-03-01

    In contact-mode scanning probe microscopy (SPM), the cantilever's dynamics are conventionally investigated by assuming the tip to be always in contact with the sample's surface. At high scanning speeds, however, the cantilever's inertia becomes dominant and the tip can therefore completely detach from the surface and start impacting upon it. Experiments at the macro-scale cannot emulate the complex micro-scale dynamics, as the system exhibits negligible effects due to meniscus forces and the surrounding medium's squeeze film damping; however, they can provide qualitative insight into the cantilever's dynamics at high frequencies, corresponding to those likely to be excited during video-rate SPM imaging. This paper investigates such intermittent impact dynamics for an upscaled cantilever, analytically, numerically, and experimentally. In contact-mode scanning, a critical scan speed exists beyond which the cantilever's tip loses contact with the sample's surface; a closed-form expression for this contact loss frequency is derived. At high scan speeds, impacts cause the cantilever to switch between different contact regimes: in-, off-, and grazing-contact; within each regime, the system's modal configuration is different. Experimentally-obtained Poincare maps indicate quasi-periodic behaviour at frequencies for which the response is repetitive, as is also predicted by the model. Intermittent impacts excite the sub- and super-harmonics of the excitation frequency, which are related to the natural frequencies of different system configurations based on the "effective" tip-end boundary conditions. The cantilever's response exhibits several phenomena, such as modal transition, beating, grazing, and possible chaotic behaviour, depending upon the relation between the excitation harmonics and the natural frequencies.

  14. Silicon Micromachined Sensor for Broadband Vibration Analysis

    NASA Technical Reports Server (NTRS)

    Gutierrez, Adolfo; Edmans, Daniel; Cormeau, Chris; Seidler, Gernot; Deangelis, Dave; Maby, Edward

    1995-01-01

    The development of a family of silicon based integrated vibration sensors capable of sensing mechanical resonances over a broad range of frequencies with minimal signal processing requirements is presented. Two basic general embodiments of the concept were designed and fabricated. The first design was structured around an array of cantilever beams and fabricated using the ARPA sponsored multi-user MEMS processing system (MUMPS) process at the Microelectronics Center of North Carolina (MCNC). As part of the design process for this first sensor, a comprehensive finite elements analysis of the resonant modes and stress distribution was performed using PATRAN. The dependence of strain distribution and resonant frequency response as a function of Young's modulus in the Poly-Si structural material was studied. Analytical models were also studied. In-house experimental characterization using optical interferometry techniques were performed under controlled low pressure conditions. A second design, intended to operate in a non-resonant mode and capable of broadband frequency response, was proposed and developed around the concept of a cantilever beam integrated with a feedback control loop to produce a null mode vibration sensor. A proprietary process was used to integrat a metal-oxide semiconductor (MOS) sensing device, with actuators and a cantilever beam, as part of a compatible process. Both devices, once incorporated as part of multifunction data acquisition and telemetry systems will constitute a useful system for NASA launch vibration monitoring operations. Satellite and other space structures can benefit from the sensor for mechanical condition monitoring functions.

  15. Femtogram Mass Biosensor Using Self-Sensing Cantilever for Allergy Check

    NASA Astrophysics Data System (ADS)

    Sone, Hayato; Ikeuchi, Ayumi; Izumi, Takashi; Okano, Haruki; Hosaka, Sumio

    2006-03-01

    A self-sensing mass biosensor with a femtogram mass sensitivity has been developed using a piezoresistive microcantilever. The mass change due to antigen and antibody adsorption on the cantilever in water was detected by the resonance frequency shift of the cantilever. We constructed a prototype harmonic vibration sensor using a commercial piezoresistive cantilever, Wheatstone bridge circuits, a positive feedback controller, an exciting piezoactuator and a phase-locked loop (PLL) demodulator. As experimental results, a mass sensitivity of about 190 fg/Hz, and a mass resolution of about 500 fg were obtained in water. The mass sensitivity is 100 times higher than that of a quartz crystal oscillation method. We demonstrated that the sensor can detect the reaction between an antibody of immunoglobulin (IgG) and an antigen of egg albumen (OVA). We confirmed that the binding ratio between the antibody and the antigen was about 1 : 2. The detection method is available for allergy check because the measured reaction ratio occurring on the cantilever concurs with the theoretical method.

  16. Research on fiber-optic cantilever-enhanced photoacoustic spectroscopy for trace gas detection

    NASA Astrophysics Data System (ADS)

    Chen, Ke; Zhou, Xinlei; Gong, Zhenfeng; Yu, Shaochen; Qu, Chao; Guo, Min; Yu, Qingxu

    2018-01-01

    We demonstrate a new scheme of cantilever-enhanced photoacoustic spectroscopy, combining a sensitivity-improved fiber-optic cantilever acoustic sensor with a tunable high-power fiber laser, for trace gas detection. The Fabry-Perot interferometer based cantilever acoustic sensor has advantages such as high sensitivity, small size, easy to install and immune to electromagnetic. Tunable erbium-doped fiber ring laser with an erbium-doped fiber amplifier is used as the light source for acoustic excitation. In order to improve the sensitivity for photoacoustic signal detection, a first-order longitudinal resonant photoacoustic cell with the resonant frequency of 1624 Hz and a large size cantilever with the first resonant frequency of 1687 Hz are designed. The size of the cantilever is 2.1 mm×1 mm, and the thickness is 10 μm. With the wavelength modulation spectrum and second-harmonic detection methods, trace ammonia (NH3) has been measured. The gas detection limits (signal-to-noise ratio = 1) near the wavelength of 1522.5 nm is achieved to be 3 ppb.

  17. Modified cantilevers to probe unambiguously out-of-plane piezoresponse

    NASA Astrophysics Data System (ADS)

    Alyabyeva, Natalia; Ouvrard, Aimeric; Lindfors-Vrejoiu, Ionela; Kolomiytsev, Alexey; Solodovnik, Maxim; Ageev, Oleg; McGrouther, Damien

    2018-06-01

    We demonstrate and investigate the coupling of contributions from both in-plane (IP) polarization and out-of-plane (OP) components in BiFeO3 (BFO) thin-film polarization probed by piezoresponse force microscopy (PFM). Such coupling leads to image artifacts which prevent the correct determination of OP polarization vector directions and the corresponding piezoelectric coefficient d33. Using material strength theory with a one-dimensional modeling of the cantilever oscillation amplitude under electrostatic and elastic forces as a function of the tip length, we have evidenced the impact of IP piezoresponse to the OP signal for tip length longer than 4 μm. The IP polarization vector induces a significant longitudinal bending of the cantilever, due to the small spring constant of long tips, which provokes a normal deviation superimposed to the OP piezoresponse. These artifacts can be reduced by increasing the longitudinal spring constant of the cantilever by shortening the tip length. Standard cantilevers with 15-μm-long tips were modified to reach the desired tip length, using focused ion-beam techniques and tested using PFM on the same BFO thin film. Tip length shortening has strongly reduced IP artifacts as expected, while the impact of nonlocal electrostatic forces, becoming predominant for tips shorter than 1 μm, has led to a non-negligible deflection offset. For shorter tips, a strong electric field from a cantilever beam can induce polarization switching as observed for a 0.5-μm-long tip. Tip length ranging from 1 to 4 μm allowed minimizing both artifacts to probe unambiguously OP piezoresponse and quantify the d33 piezoelectric coefficient.

  18. Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

    PubMed

    Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

    2014-12-01

    Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.

  19. Estimating the transfer function of the cantilever in atomic force microscopy: A system identification approach

    NASA Astrophysics Data System (ADS)

    Stark, Martin; Guckenberger, Reinhard; Stemmer, Andreas; Stark, Robert W.

    2005-12-01

    Dynamic atomic force microscopy (AFM) offers many opportunities for the characterization and manipulation of matter on the nanometer scale with a high temporal resolution. The analysis of time-dependent forces is basic for a deeper understanding of phenomena such as friction, plastic deformation, and surface wetting. However, the dynamic characteristics of the force sensor used for such investigations are determined by various factors such as material and geometry of the cantilever, detection alignment, and the transfer characteristics of the detector. Thus, for a quantitative investigation of surface properties by dynamic AFM an appropriate system identification procedure is required, characterizing the force sensor beyond the usual parameters spring constant, quality factor, and detection sensitivity. Measurement of the transfer function provides such a characterization that fully accounts for the dynamic properties of the force sensor. Here, we demonstrate the estimation of the transfer function in a bandwidth of 1MHz from experimental data. To this end, we analyze the signal of the vibrations induced by snap-to-contact and snap-off-contact events. For the free cantilever, we determine both a parameter-free estimate [empirical transfer function estimate (ETFE)] and a parametric estimate of the transfer function. For the surface-coupled cantilever the ETFE is obtained. These identification procedures provide an intrinsic calibration as they dispense largely with a priori knowledge about the force sensor.

  20. Free torsional vibrations of tapered cantilever I-beams

    NASA Astrophysics Data System (ADS)

    Rao, C. Kameswara; Mirza, S.

    1988-08-01

    Torsional vibration characteristics of linearly tapered cantilever I-beams have been studied by using the Galerkin finite element method. A third degree polynomial is assumed for the angle of twist. The analysis presented is valid for long beams and includes the effect of warping. The individual as well as combined effects of linear tapers in the width of the flanges and the depth of the web on the torsional vibration of cantilever I-beams are investigated. Numerical results generated for various values of taper ratios are presented in graphical form.

  1. Accurate Calibration and Uncertainty Estimation of the Normal Spring Constant of Various AFM Cantilevers

    PubMed Central

    Song, Yunpeng; Wu, Sen; Xu, Linyan; Fu, Xing

    2015-01-01

    Measurement of force on a micro- or nano-Newton scale is important when exploring the mechanical properties of materials in the biophysics and nanomechanical fields. The atomic force microscope (AFM) is widely used in microforce measurement. The cantilever probe works as an AFM force sensor, and the spring constant of the cantilever is of great significance to the accuracy of the measurement results. This paper presents a normal spring constant calibration method with the combined use of an electromagnetic balance and a homemade AFM head. When the cantilever presses the balance, its deflection is detected through an optical lever integrated in the AFM head. Meanwhile, the corresponding bending force is recorded by the balance. Then the spring constant can be simply calculated using Hooke’s law. During the calibration, a feedback loop is applied to control the deflection of the cantilever. Errors that may affect the stability of the cantilever could be compensated rapidly. Five types of commercial cantilevers with different shapes, stiffness, and operating modes were chosen to evaluate the performance of our system. Based on the uncertainty analysis, the expanded relative standard uncertainties of the normal spring constant of most measured cantilevers are believed to be better than 2%. PMID:25763650

  2. Accurate calibration and uncertainty estimation of the normal spring constant of various AFM cantilevers.

    PubMed

    Song, Yunpeng; Wu, Sen; Xu, Linyan; Fu, Xing

    2015-03-10

    Measurement of force on a micro- or nano-Newton scale is important when exploring the mechanical properties of materials in the biophysics and nanomechanical fields. The atomic force microscope (AFM) is widely used in microforce measurement. The cantilever probe works as an AFM force sensor, and the spring constant of the cantilever is of great significance to the accuracy of the measurement results. This paper presents a normal spring constant calibration method with the combined use of an electromagnetic balance and a homemade AFM head. When the cantilever presses the balance, its deflection is detected through an optical lever integrated in the AFM head. Meanwhile, the corresponding bending force is recorded by the balance. Then the spring constant can be simply calculated using Hooke's law. During the calibration, a feedback loop is applied to control the deflection of the cantilever. Errors that may affect the stability of the cantilever could be compensated rapidly. Five types of commercial cantilevers with different shapes, stiffness, and operating modes were chosen to evaluate the performance of our system. Based on the uncertainty analysis, the expanded relative standard uncertainties of the normal spring constant of most measured cantilevers are believed to be better than 2%.

  3. Q-factor control of multilayer micromembrane using PZT composite material

    NASA Astrophysics Data System (ADS)

    Čekas, Elingas; Janušas, Giedrius; Palevicius, Arvydas; Janušas, Tomas; Ciganas, Justas

    2018-02-01

    Cantilever and membrane based sensors, which are capable of providing accurate detection of target analytes have been always an important research topic of medical diagnostics, food testing, and environmental monitoring fields. Here, the mechanical detection is achieved by micro- and nano-scale cantilevers for stress sensing and mass sensing, or micro- and nano-scale plates or membranes. High sensitivity is a major issue for the active element and it could be achieved via increased Q-factor. The ability to control the Q factor expands the range of application of the device and allows to achieve more accurate results. The aim of this paper is to investigate the mechanical and electrical properties, as well as, the ability to control the Q factor of the membrane with PZT nanocomposite. This multilayered membrane was formatted using the n-type <100> silicon substrate by implementing the Low Pressure Chemical Vapor Deposition (LPCVD), photolithography by using photomask with defined dimensions, deep etching, and e-beam evaporation techniques. Dynamic and electrical characteristics of the membrane were numerically investigated using COMSOL Multiphysics software. The use of the multilayered membrane can range from simple monitoring of particles concentration in a closed environment to inspecting glucose levels in human fluids (blood, tears, sweat, etc.).

  4. Thickness ratio effects on quasistatic actuation and sensing behavior of laminate magnetoelectric cantilevers

    NASA Astrophysics Data System (ADS)

    Wang, Yezuo; Atulasimha, Jayasimha; Clarke, Joshua; Sundaresan, Vishnu B.

    2010-04-01

    In this work, the magnetoelectric cantilever composed of a layer of Galfenol and a layer of PZT-5H is studied for novel applications such as surgical ablation tools and cutting tools for machining applications. For developing a suitable model for the magnetoelectric cantilever, an energy based approach for the non-linear constitutive behavior of the magnetostrictive material and linear piezoelectric constitutive equations will be coupled with Euler Bernoulli model for composite beams. The cantilever is held in a uniform magnetic field and the magnetic field is measured by a Gaussmeter. The tip-deflection of the cantilever is detected by a laser triangulation sensor. The piezoelectric response can be studied with low noise preamplifier. Four PZT-5H layers with different thickness are separately bonded on the top of the same Galfenol layer and characterized to study the thickness ratio effects on the quasistatic actuation and sensing behavior of the composite cantilever.

  5. A Micro-Preconcentrator Combined Olfactory Sensing System with a Micromechanical Cantilever Sensor for Detecting 2,4-Dinitrotoluene Gas Vapor

    PubMed Central

    Chae, Myung-Sic; Kim, Jinsik; Yoo, Yong Kyoung; Kang, Ji Yoon; Lee, Jeong Hoon; Hwang, Kyo Seon

    2015-01-01

    Preventing unexpected explosive attacks and tracing explosion-related molecules require the development of highly sensitive gas-vapor detection systems. For that purpose, a micromechanical cantilever-based olfactory sensing system including a sample preconcentrator was developed to detect 2,4-dinitrotoluene (2,4-DNT), which is a well-known by-product of the explosive molecule trinitrotoluene (TNT) and exists in concentrations on the order of parts per billion in the atmosphere at room temperature. A peptide receptor (His-Pro-Asn-Phe-Ser-Lys-Tyr-Ile-Leu-His-Gln-Arg) that has high binding affinity for 2,4-DNT was immobilized on the surface of the cantilever sensors to detect 2,4-DNT vapor for highly selective detection. A micro-preconcentrator (µPC) was developed using Tenax-TA adsorbent to produce higher concentrations of 2,4-DNT molecules. The preconcentration was achieved via adsorption and thermal desorption phenomena occurring between target molecules and the adsorbent. The µPC directly integrated with a cantilever sensor and enhanced the sensitivity of the cantilever sensor as a pretreatment tool for the target vapor. The response was rapidly saturated within 5 min and sustained for more than 10 min when the concentrated vapor was introduced. By calculating preconcentration factor values, we verified that the cantilever sensor provides up to an eightfold improvement in sensing performance. PMID:26213944

  6. Effect of cantilever length and alloy framework on the stress distribution in peri-implant area of cantilevered implant-supported fixed partial dentures

    PubMed Central

    SUEDAM, Valdey; MORETTI, Rafael Tobias; SOUSA, Edson Antonio Capello; RUBO, José Henrique

    2016-01-01

    ABSTRACT Because many mechanical variables are present in the oral cavity, the proper load transfer between the prosthesis and the bone is important for treatment planning and for the longevity of the implant-supported fixed partial denture. Objectives To verify the stress generated on the peri-implant area of cantilevered implant-supported fixed partial dentures and the potential effects of such variable. Material and Methods A U-shaped polyurethane model simulating the mandibular bone containing two implants (Ø 3.75 mm) was used. Six groups were formed according to the alloy’s framework (CoCr or PdAg) and the point of load application (5 mm, 10 mm and 15 mm of cantilever arm). A 300 N load was applied in pre-determined reference points. The tension generated on the mesial, lingual, distal and buccal sides of the peri-implant regions was assessed using strain gauges. Results Two-way ANOVA and Tukey statistical tests were applied showing significant differences (p<0.05) between the groups. Pearson correlation test (p<0.05) was applied showing positive correlations between the increase of the cantilever arm and the deformation of the peri-implant area. Conclusions This report demonstrated the CoCr alloy shows larger compression values compared to the PdAg alloy for the same distances of cantilever. The point of load application influences the deformation on the peri-implant area, increasing in accordance with the increase of the lever arm. PMID:27119758

  7. Indium phosphide-based monolithically integrated PIN waveguide photodiode readout for resonant cantilever sensors

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Siwak, N. P.; Laboratory for the Physical Sciences, 8050 Greenmead Drive, College Park, Maryland 20740; Fan, X. Z.

    2014-10-06

    An integrated photodiode displacement readout scheme for a microelectromechanical cantilever waveguide resonator sensing platform is presented. III-V semiconductors are used to enable the monolithic integration of passive waveguides with active optical components. This work builds upon previously demonstrated results by measuring the displacement of cantilever waveguide resonators with on-chip waveguide PIN photodiodes. The on-chip integration of the readout provides an additional 70% improvement in mass sensitivity compared to off-chip photodetector designs due to measurement stability and minimized coupling loss. In addition to increased measurement stability, reduced packaging complexity is achieved due to the simplicity of the readout design. We havemore » fabricated cantilever waveguides with integrated photodetectors and experimentally characterized these cantilever sensors with monolithically integrated PIN photodiodes.« less

  8. Real-time measurement of flow rate in microfluidic devices using a cantilever-based optofluidic sensor.

    PubMed

    Cheri, Mohammad Sadegh; Latifi, Hamid; Sadeghi, Jalal; Moghaddam, Mohammadreza Salehi; Shahraki, Hamidreza; Hajghassem, Hasan

    2014-01-21

    Real-time and accurate measurement of flow rate is an important reqirement in lab on a chip (LOC) and micro total analysis system (μTAS) applications. In this paper, we present an experimental and numerical investigation of a cantilever-based optofluidic flow sensor for this purpose. Two sensors with thin and thick cantilevers were fabricated by engraving a 2D pattern of cantilever/base on two polymethylmethacrylate (PMMA) slabs using a CO2 laser system and then casting a 2D pattern with polydimethylsiloxane (PDMS). The basic working principle of the sensor is the fringe shift of the Fabry-Pérot (FP) spectrum due to a changing flow rate. A Finite Element Method (FEM) is used to solve the three dimensional (3D) Navier-Stokes and structural deformation equations to simulate the pressure distribution, velocity and cantilever deflection results of the flow in the channel. The experimental results show that the thin and thick cantilevers have a minimum detectable flow change of 1.3 and 4 (μL min(-1)) respectively. In addition, a comparison of the numerical and experimental deflection of the cantilever has been done to obtain the effective Young's modulus of the thin and thick PDMS cantilevers.

  9. Modeling silicon diode energy response factors for use in therapeutic photon beams.

    PubMed

    Eklund, Karin; Ahnesjö, Anders

    2009-10-21

    Silicon diodes have good spatial resolution, which makes them advantageous over ionization chambers for dosimetry in fields with high dose gradients. However, silicon diodes overrespond to low-energy photons, that are more abundant in scatter which increase with large fields and larger depths. We present a cavity-theory-based model for a general response function for silicon detectors at arbitrary positions within photon fields. The model uses photon and electron spectra calculated from fluence pencil kernels. The incident photons are treated according to their energy through a bipartition of the primary beam photon spectrum into low- and high-energy components. Primary electrons from the high-energy component are treated according to Spencer-Attix cavity theory. Low-energy primary photons together with all scattered photons are treated according to large cavity theory supplemented with an energy-dependent factor K(E) to compensate for energy variations in the electron equilibrium. The depth variation of the response for an unshielded silicon detector has been calculated for 5 x 5 cm(2), 10 x 10 cm(2) and 20 x 20 cm(2) fields in 6 and 15 MV beams and compared with measurements showing that our model calculates response factors with deviations less than 0.6%. An alternative method is also proposed, where we show that one can use a correlation with the scatter factor to determine the detector response of silicon diodes with an error of less than 3% in 6 MV and 15 MV photon beams.

  10. Cantilever-beam dynamic modulus for wood composite products. Part 1, apparatus

    Treesearch

    Chris Turk; John F. Hunt; David J. Marr

    2008-01-01

    A cantilever-beam vibration-testing apparatus has been developed to provide a means of dynamic and non-destructive evaluation of modulus of elasticity for small samples of wood or wood-composite material. The apparatus applies a known displacement to a cantilever beam and then releases the beam into its natural first-mode vibration and records displacement as a...

  11. Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures

    PubMed Central

    Zou, Limin; Ni, He; Zhang, Peng; Ding, Xuemei

    2017-01-01

    In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm. PMID:29156602

  12. Assembled Cantilever Fiber Touch Trigger Probe for Three-Dimensional Measurement of Microstructures.

    PubMed

    Zou, Limin; Ni, He; Zhang, Peng; Ding, Xuemei

    2017-11-20

    In this paper, an assembled cantilever fiber touch trigger probe was developed for three-dimensional measurements of clear microstructures. The probe consists of a shaft assembled vertically to an optical fiber cantilever and a probing sphere located at the free end of the shaft. The laser is emitted from the free end of the fiber cantilever and converges on the photosensitive surface of the camera through the lens. The position shift of the light spot centroid was used to detect the performance of the optical fiber cantilever, which changed dramatically when the probing sphere touched the objects being measured. Experimental results indicated that the sensing system has sensitivities of 3.32 pixels/μm, 1.35 pixels/μm, and 7.38 pixels/μm in the x, y, and z directions, respectively, and resolutions of 10 nm, 30 nm, and 5 nm were achieved in the x, y, and z, respectively. An experiment on micro slit measurement was performed to verify the high aspect ratio measurement capability of the assembled cantilever fiber (ACF) probe and to calibrate the effective two-point diameter of the probing sphere. The two-point probe sphere diameter was found to be 174.634 μm with a standard uncertainly of 0.045 μm.

  13. Imaging via complete cantilever dynamic detection: General dynamic mode imaging and spectroscopy in scanning probe microscopy

    DOE PAGES

    Somnath, Suhas; Collins, Liam; Matheson, Michael A.; ...

    2016-09-08

    We develop and implement a multifrequency spectroscopy and spectroscopic imaging mode, referred to as general dynamic mode (GDM), that captures the complete spatially- and stimulus dependent information on nonlinear cantilever dynamics in scanning probe microscopy (SPM). GDM acquires the cantilever response including harmonics and mode mixing products across the entire broadband cantilever spectrum as a function of excitation frequency. GDM spectra substitute the classical measurements in SPM, e.g. amplitude and phase in lock-in detection. Here, GDM is used to investigate the response of a purely capacitively driven cantilever. We use information theory techniques to mine the data and verify themore » findings with governing equations and classical lock-in based approaches. We explore the dependence of the cantilever dynamics on the tip–sample distance, AC and DC driving bias. This approach can be applied to investigate the dynamic behavior of other systems within and beyond dynamic SPM. In conclusion, GDM is expected to be useful for separating the contribution of different physical phenomena in the cantilever response and understanding the role of cantilever dynamics in dynamic AFM techniques.« less

  14. Vibrational fatigue failures in short cantilevered piping with socket-welding fittings

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Smith, J.K.

    1996-12-01

    Approximately 80% of the vibrational fatigue failures in nuclear power plants have been caused by high cycle vibrational fatigue. Many of these failures have occurred in short, small bore (2 in. nominal diameter and smaller), unbraced, cantilevered piping with socket-welding fittings. The fatigue failures initiated in the socket welds. These failures have been unexpected, and have caused costly, unscheduled outages in some cases. In order to reduce the number of vibrational fatigue failures in these short cantilevered pipes, an acceleration based vibrational fatigue screening criteria was developed under Electric Power Research Institute (EPRI) sponsorship. In this paper, the acceleration basedmore » criteria will be compared to the results obtained from detailed dynamic modeling of a short, cantilevered pipe.« less

  15. Cantilever clamp fitting

    NASA Technical Reports Server (NTRS)

    Melton, Patrick B. (Inventor)

    1989-01-01

    A device is disclosed for sealing and clamping a cylindrical element which is to be attached to an object such as a wall, a pressurized vessel or another cylindrical element. The device includes a gland having an inner cylindrical wall, which is threaded at one end and is attached at a bendable end to a deformable portion, which in turn is attached to one end of a conical cantilever structure. The other end of the cantilever structure connects at a bendable area to one end of an outer cylindrical wall. The opposite end of cylindrical wall terminates in a thickened portion, the radially outer surface of which is adapted to accommodate a tool for rotating the gland. The terminal end of cylindrical wall also includes an abutment surface, which is adapted to engage a seal, which in turn engages a surface of a receiver. The receiver further includes a threaded portion for engagement with the threaded portion of gland whereby a tightening rotation of gland relative to receiver will cause relative movement between cylindrical walls and of gland. This movement causes a rotation of the conical structure and thus a bending action at bending area and at the bending end of the upper end of inner cylindrical wall. These rotational and bending actions result in a forcing of the deformable portion radially inwardly so as to contact and deform a pipe. This forcible contact creates a seal between gland and pipe, and simultaneously clamps the pipe in position.

  16. Static deflection analysis of non prismatic multilayer p-NEMS cantilevers under electrical load

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Pavithra, M., E-mail: pavithramasi78@gmail.com; Muruganand, S.

    2016-04-13

    Deflection of Euler-Bernoulli non prismatic multilayer piezoelectric nano electromechanical (p-NEMS) cantilever beams have been studied theoretically for various profiles of p-NEMS cantilevers by applying the electrical load. This problem has been answered by applying the boundary conditions derived by simple polynomials. This method is applied for various profiles like rectangular and trapezoidal by varying the thickness of the piezoelectric layer as well as the material. The obtained results provide the better deflection for trapezoidal profile with ZnO piezo electric layer of suitable nano cantilevers for nano scale applications.

  17. Design and fabrication of vibration based energy harvester using microelectromechanical system piezoelectric cantilever for low power applications.

    PubMed

    Kim, Moonkeun; Lee, Sang-Kyun; Yang, Yil Suk; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

    2013-12-01

    We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant frequency of the multilayer composition cantilevers were simulated using the finite element method (FEM) with parametric analysis carried out in the design process. According to simulations, the resonant frequency, voltage, and average power of a dual-beam cantilever was 69.1 Hz, 113.9 mV, and 0.303 microW, respectively, at optimal resistance and 0.5 g (gravitational acceleration, m/s2). Based on these data, we subsequently fabricated cantilever devices using dual-beam cantilevers. The harvested power density of the dual-beam cantilever compared favorably with the simulation. Experiments revealed the resonant frequency, voltage, and average power density to be 78.7 Hz, 118.5 mV, and 0.34 microW, respectively. The error between the measured and simulated results was about 10%. The maximum average power and power density of the fabricated dual-beam cantilever at 1 g were 0.803 microW and 1322.80 microW cm(-3), respectively. Furthermore, the possibility of a MEMS-scale power source for energy conversion experiments was also tested.

  18. On occlusal forces in dentitions with implant-supported fixed cantilever prostheses.

    PubMed

    Falk, H

    1990-01-01

    The main aims of this thesis were (1) to study the functional characteristics of dentitions with mandibular implant-supported fixed cantilever prostheses - IFCP s- occluding with complete dentures, (2) to study in detail the magnitudes and distributions of axially directed closing and chewing forces in such dentitions, (3) to study the influence of number and distribution of occlusal contacts on the magnitude and distribution of closing and chewing forces, (4) to assess the vertical bending moment and the resulting vertical bending stress in the cantilever joints and (5) to find out whether the force distribution over the cantilever beams and the resulting vertical bending stress in the cantilever joint are influenced by the type of prosthetic construction in the opposing jaw. Closing and chewing forces were registered in altogether seventeen subjects by means of miniature strain gauge transducers mounted bilaterally and symmetrically in performed matrices in prosthetic appliances. Four, six or eight transducers, evenly distributed over the tooth-arch, permitted registrations of axially directed occlusal forces in several occluding areas simultaneously. In Papers I-IV, the implant-supported prostheses were installed in the mandible and occluded with complete dentures. In Paper V, group A, the fixture-supported prostheses were installed in the maxilla and occluded with tooth-supported fixed partial dentures whereas in group B, the arrangements were analogous to those in Papers I-IV. All subjects exhibited a rhythmic chewing pattern and preferred one side for chewing although both sides were used. Most chewing sequences were terminated with swallowing with occlusal force development. The mean total forces acting over the tooth-arch varied somewhat between groups and occlusal arrangements but averaged 350 and 170 N for closing and chewing respectively. Closing and chewing forces increased distally along the cantilever beams when occluding with complete dentures and

  19. Comparison between Conduction and Convection Effects on Self-Heating in Doped Microcantilevers

    PubMed Central

    Ansari, Mohd Zahid; Cho, Chongdu

    2012-01-01

    The present study investigates the effects of thermal conduction and convection on self-heating temperatures and bimetallic deflections produced in doped microcantilever sensors. These cantilevers are commonly used as sensors and actuators in microsystems. The cantilever is a monolith, multi-layer structure with a thin U-shaped element inside. The cantilever substrate is made of silicon and silicon dioxide, respectively, and the element is p-doped silicon. A numerical analysis package (ANSYS) is used to study the effect of cantilever substrate material, element width, applied voltage and the operating environments on cantilever characteristics. The numerical results for temperature are compared against their analytical models. Results indicate the numerical results are accurate within 6% of analytical, and Si/Si cantilevers are more suitable for biosensors and AFM, whereas, Si/SiO2 are for hotplates and actuators applications. PMID:22438736

  20. Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

    NASA Astrophysics Data System (ADS)

    Balpande, Suresh S.; Pande, Rajesh S.

    2016-04-01

    Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition to this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of harvester and

  1. Optimization of shape control of a cantilever beam using dielectric elastomer actuators

    NASA Astrophysics Data System (ADS)

    Liu, Chong; Mao, Boyong; Huang, Gangting; Wu, Qichen; Xie, Shilin; Xu, Minglong

    2018-05-01

    Dielectric elastomer (DE) is a kind of smart soft material that has many advantages such as large deformation, fast response, lightweight and easy synthesis. These features make dielectric elastomer a suitable material for actuators. This article focuses on the shape control of a cantilever beam by using dielectric elastomer actuators. The shape control equation in finite element formulation of the cantilever beam partially covered with dielectric elastomer actuators is derived based on the constitutive equation of dielectric elastomer material by using Hamilton principle. The actuating forces produced by dielectric elastomer actuators depend on the number of layers, the position and the actuation voltage of dielectric elastomer actuators. First, effects of these factors on the shape control accuracy when one pair or multiple pairs of actuators are employed are simulated, respectively. The simulation results demonstrate that increasing the number of actuators or the number of layers can improve the control effect and reduce the actuation voltages effectively. Second, to achieve the optimal shape control effect, the position of the actuators and the drive voltages are all determined using a genetic algorithm. The robustness of the genetic algorithm is analyzed. Moreover, the implications of using one pair and multiple pairs of actuators to drive the cantilever beam to the expected shape are investigated. The results demonstrate that a small number of actuators with optimal placement and optimal voltage values can achieve the shape control of the beam effectively. Finally, a preliminary experimental verification of the control effect is carried out, which shows the correctness of the theoretical method.

  2. Integrated MOSFET-Embedded-Cantilever-Based Biosensor Characteristic for Detection of Anthrax Simulant

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mostafa, Salwa; Lee, Ida; Islam, Syed K

    2011-01-01

    In this work, MOSFET-embedded cantilevers are configured as microbial sensors for detection of anthrax simulants, Bacillus thuringiensis. Anthrax simulants attached to the chemically treated gold-coated cantilever cause changes in the MOSFET drain current due to the bending of the cantilever which indicates the detection of anthrax simulant. Electrical properties of the anthrax simulant are also responsible for the change in the drain current. The test results suggest a detection range of 10 L of stimulant test solution (a suspension population of 1.3 107 colony-forming units/mL diluted in 40% ethanol and 60% deionized water) with a linear response of 31 A/more » L.« less

  3. MEMS cantilever sensor for THz photoacoustic chemical sensing and pectroscopy

    NASA Astrophysics Data System (ADS)

    Glauvitz, Nathan E.

    Sensitive Microelectromechanical System (MEMS) cantilever designs were modeled, fabricated, and tested to measure the photoacoustic (PA) response of gasses to terahertz (THz) radiation. Surface and bulk micromachining technologies were employed to create the extremely sensitive devices that could detect very small changes in pressure. Fabricated devices were then tested in a custom made THz PA vacuum test chamber where the cantilever deflections caused by the photoacoustic effect were measured with a laser interferometer and iris beam clipped methods. The sensitive cantilever designs achieved a normalized noise equivalent absorption coefficient of 2.83x10-10 cm-1 W Hz-½ using a 25 microW radiation source power and a 1 s sampling time. Traditional gas phase molecular spectroscopy absorption cells are large and bulky. The outcome of this research resulted was a photoacoustic detection method that was virtually independent of the absorption path-length, which allowed the chamber dimensions to be greatly reduced, leading to the possibility of a compact, portable chemical detection and spectroscopy system

  4. Self-mixing interferometry in vertical-cavity surface-emitting lasers for nanomechanical cantilever sensing

    NASA Astrophysics Data System (ADS)

    Larsson, David; Greve, Anders; Hvam, Jørn M.; Boisen, Anja; Yvind, Kresten

    2009-03-01

    We have experimentally investigated self-mixing interference produced by the feedback of light from a polymer micrometer-sized cantilever into a vertical-cavity surface-emitting laser for sensing applications. In particular we have investigated how the visibility of the optical output power and the junction voltage depends on the laser injection current and the distance to the cantilever. The highest power visibility obtained from cantilevers without reflective coatings was ˜60%, resulting in a very high sensitivity of 45 mV/nm with a noise floor below 1.2 mV. Different detection schemes are discussed.

  5. Use of self-actuating and self-sensing cantilevers for imaging biological samples in fluid

    PubMed Central

    Barbero, R J; Deutschinger, A; Todorov, V; Gray, D S; Belcher, A M; Rangelow, I W; Youcef-Toumi, K

    2014-01-01

    In this paper, we present a detailed investigation into the suitability of atomic force microscopy (AFM) cantilevers with integrated deflection sensor and micro-actuator for imaging of soft biological samples in fluid. The Si cantilevers are actuated using a micro-heater at the bottom end of the cantilever. Sensing is achieved through p-doped resistors connected in a Wheatstone bridge. We investigated the influence of the water on the cantilever dynamics, the actuation and the sensing mechanisms, as well as the crosstalk between sensing and actuation. Successful imaging of yeast cells in water using the integrated sensor and actuator shows the potential of the combination of this actuation and sensing method. This constitutes a major step towards the automation and miniaturization required to establish AFM in routine biomedical diagnostics and in vivo applications. PMID:19801750

  6. Numerical investigation of band gaps in 3D printed cantilever-in-mass metamaterials

    NASA Astrophysics Data System (ADS)

    Qureshi, Awais; Li, Bing; Tan, K. T.

    2016-06-01

    In this research, the negative effective mass behavior of elastic/mechanical metamaterials is exhibited by a cantilever-in-mass structure as a proposed design for creating frequency stopping band gaps, based on local resonance of the internal structure. The mass-in-mass unit cell model is transformed into a cantilever-in-mass model using the Bernoulli-Euler beam theory. An analytical model of the cantilever-in-mass structure is derived and the effects of geometrical dimensions and material parameters to create frequency band gaps are examined. A two-dimensional finite element model is created to validate the analytical results, and excellent agreement is achieved. The analytical model establishes an easily tunable metamaterial design to realize wave attenuation based on locally resonant frequency. To demonstrate feasibility for 3D printing, the analytical model is employed to design and fabricate 3D printable mechanical metamaterial. A three-dimensional numerical experiment is performed using COMSOL Multiphysics to validate the wave attenuation performance. Results show that the cantilever-in-mass metamaterial is capable of mitigating stress waves at the desired resonance frequency. Our study successfully presents the use of one constituent material to create a 3D printed cantilever-in-mass metamaterial with negative effective mass density for stress wave mitigation purposes.

  7. Piezoresistive AFM cantilevers surpassing standard optical beam deflection in low noise topography imaging

    PubMed Central

    Dukic, Maja; Adams, Jonathan D.; Fantner, Georg E.

    2015-01-01

    Optical beam deflection (OBD) is the most prevalent method for measuring cantilever deflections in atomic force microscopy (AFM), mainly due to its excellent noise performance. In contrast, piezoresistive strain-sensing techniques provide benefits over OBD in readout size and the ability to image in light-sensitive or opaque environments, but traditionally have worse noise performance. Miniaturisation of cantilevers, however, brings much greater benefit to the noise performance of piezoresistive sensing than to OBD. In this paper, we show both theoretically and experimentally that by using small-sized piezoresistive cantilevers, the AFM imaging noise equal or lower than the OBD readout noise is feasible, at standard scanning speeds and power dissipation. We demonstrate that with both readouts we achieve a system noise of ≈0.3 Å at 20 kHz measurement bandwidth. Finally, we show that small-sized piezoresistive cantilevers are well suited for piezoresistive nanoscale imaging of biological and solid state samples in air. PMID:26574164

  8. Direct-write nanoscale printing of nanogranular tunnelling strain sensors for sub-micrometre cantilevers

    PubMed Central

    Dukic, Maja; Winhold, Marcel; Schwalb, Christian H.; Adams, Jonathan D.; Stavrov, Vladimir; Huth, Michael; Fantner, Georg E.

    2016-01-01

    The sensitivity and detection speed of cantilever-based mechanical sensors increases drastically through size reduction. The need for such increased performance for high-speed nanocharacterization and bio-sensing, drives their sub-micrometre miniaturization in a variety of research fields. However, existing detection methods of the cantilever motion do not scale down easily, prohibiting further increase in the sensitivity and detection speed. Here we report a nanomechanical sensor readout based on electron co-tunnelling through a nanogranular metal. The sensors can be deposited with lateral dimensions down to tens of nm, allowing the readout of nanoscale cantilevers without constraints on their size, geometry or material. By modifying the inter-granular tunnel-coupling strength, the sensors' conductivity can be tuned by up to four orders of magnitude, to optimize their performance. We show that the nanoscale printed sensors are functional on 500 nm wide cantilevers and that their sensitivity is suited even for demanding applications such as atomic force microscopy. PMID:27666316

  9. Study of node and mass sensitivity of resonant mode based cantilevers with concentrated mass loading

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Zhang, Kewei, E-mail: drzkw@126.com; Chai, Yuesheng; Fu, Jiahui

    2015-12-15

    Resonant-mode based cantilevers are an important type of acoustic wave based mass-sensing devices. In this work, the governing vibration equation of a bi-layer resonant-mode based cantilever attached with concentrated mass is established by using a modal analysis method. The effects of resonance modes and mass loading conditions on nodes and mass sensitivity of the cantilever were theoretically studied. The results suggested that the node did not shift when concentrated mass was loaded on a specific position. Mass sensitivity of the cantilever was linearly proportional to the square of the point displacement at the mass loading position for all the resonancemore » modes. For the first resonance mode, when mass loading position x{sub c} satisfied 0 < x{sub c} < ∼ 0.3l (l is the cantilever beam length and 0 represents the rigid end), mass sensitivity decreased as the mass increasing while the opposite trend was obtained when mass loading satisfied ∼0.3l ≤ x{sub c} ≤ l. Mass sensitivity did not change when concentrated mass was loaded at the rigid end. This work can provide scientific guidance to optimize the mass sensitivity of a resonant-mode based cantilever.« less

  10. Analysis of dynamic cantilever behavior in tapping mode atomic force microscopy.

    PubMed

    Deng, Wenqi; Zhang, Guang-Ming; Murphy, Mark F; Lilley, Francis; Harvey, David M; Burton, David R

    2015-10-01

    Tapping mode atomic force microscopy (AFM) provides phase images in addition to height and amplitude images. Although the behavior of tapping mode AFM has been investigated using mathematical modeling, comprehensive understanding of the behavior of tapping mode AFM still poses a significant challenge to the AFM community, involving issues such as the correct interpretation of the phase images. In this paper, the cantilever's dynamic behavior in tapping mode AFM is studied through a three dimensional finite element method. The cantilever's dynamic displacement responses are firstly obtained via simulation under different tip-sample separations, and for different tip-sample interaction forces, such as elastic force, adhesion force, viscosity force, and the van der Waals force, which correspond to the cantilever's action upon various different representative computer-generated test samples. Simulated results show that the dynamic cantilever displacement response can be divided into three zones: a free vibration zone, a transition zone, and a contact vibration zone. Phase trajectory, phase shift, transition time, pseudo stable amplitude, and frequency changes are then analyzed from the dynamic displacement responses that are obtained. Finally, experiments are carried out on a real AFM system to support the findings of the simulations. © 2015 Wiley Periodicals, Inc.

  11. Cantilever epitaxial process

    DOEpatents

    Ashby, Carol I.; Follstaedt, David M.; Mitchell, Christine C.; Han, Jung

    2003-07-29

    A process of growing a material on a substrate, particularly growing a Group II-VI or Group III-V material, by a vapor-phase growth technique where the growth process eliminates the need for utilization of a mask or removal of the substrate from the reactor at any time during the processing. A nucleation layer is first grown upon which a middle layer is grown to provide surfaces for subsequent lateral cantilever growth. The lateral growth rate is controlled by altering the reactor temperature, pressure, reactant concentrations or reactant flow rates. Semiconductor materials, such as GaN, can be produced with dislocation densities less than 10.sup.7 /cm.sup.2.

  12. Piezoresistor-equipped fluorescence-based cantilever probe for near-field scanning.

    PubMed

    Kan, Tetsuo; Matsumoto, Kiyoshi; Shimoyama, Isao

    2007-08-01

    Scanning near-field optical microscopes (SNOMs) with fluorescence-based probes are promising tools for evaluating the optical characteristics of nanoaperture devices used for biological investigations, and this article reports on the development of a microfabricated fluorescence-based SNOM probe with a piezoresistor. The piezoresistor was built into a two-legged root of a 160-microm-long cantilever. To improve the displacement sensitivity of the cantilever, the piezoresistor's doped area was shallowly formed on the cantilever surface. A fluorescent bead, 500 nm in diameter, was attached to the bottom of the cantilever end as a light-intensity-sensitive material in the visible-light range. The surface of the scanned sample was simply detected by the probe's end being displaced by contact with the sample. Measuring displacements piezoresistively is advantageous because it eliminates the noise arising from the use of the optical-lever method and is free of any disturbance in the absorption or the emission spectrum of the fluorescent material at the probe tip. The displacement sensitivity was estimated to be 6.1 x 10(-6) nm(-1), and the minimum measurable displacement was small enough for near-field measurement. This probe enabled clear scanning images of the light field near a 300 x 300 nm(2) aperture to be obtained in the near-field region where the tip-sample distance is much shorter than the light wavelength. This scanning result indicates that the piezoresistive way of tip-sample distance regulation is effective for characterizing nanoaperture optical devices.

  13. Method and apparatus for sensing the natural frequency of a cantilevered body

    DOEpatents

    Duncan, Michael G.

    2000-01-01

    A method and apparatus for measuring the natural resonant frequency of a spring element by monitoring a phase difference between an output signal from the spring element and an input signal to the spring element and by adjusting frequency of the input signal until a detected phase difference signals that the natural resonant frequency has been reached. The method and apparatus are applied to a micro-cantilevered elements used to measure gas compositions and concentrations. Such elements are provided with coatings that absorb gas to cause deflections and changes in the mass or spring constant of the cantilevered element. These changes correspond to changes in the natural resonant frequency of the cantilevered element which are measured using the method and apparatus described herein.

  14. Fast optical cooling of a nanomechanical cantilever by a dynamical Stark-shift gate.

    PubMed

    Yan, Leilei; Zhang, Jian-Qi; Zhang, Shuo; Feng, Mang

    2015-10-12

    The efficient cooling of nanomechanical resonators is essential to exploration of quantum properties of the macroscopic or mesoscopic systems. We propose such a laser-cooling scheme for a nanomechanical cantilever, which works even for the low-frequency mechanical mode and under weak cooling lasers. The cantilever is coupled by a diamond nitrogen-vacancy center under a strong magnetic field gradient and the cooling is assisted by a dynamical Stark-shift gate. Our scheme can effectively enhance the desired cooling efficiency by avoiding the off-resonant and undesired carrier transitions, and thereby cool the cantilever down to the vicinity of the vibrational ground state in a fast fashion.

  15. Fast optical cooling of a nanomechanical cantilever by a dynamical Stark-shift gate

    PubMed Central

    Yan, Leilei; Zhang, Jian-Qi; Zhang, Shuo; Feng, Mang

    2015-01-01

    The efficient cooling of nanomechanical resonators is essential to exploration of quantum properties of the macroscopic or mesoscopic systems. We propose such a laser-cooling scheme for a nanomechanical cantilever, which works even for the low-frequency mechanical mode and under weak cooling lasers. The cantilever is coupled by a diamond nitrogen-vacancy center under a strong magnetic field gradient and the cooling is assisted by a dynamical Stark-shift gate. Our scheme can effectively enhance the desired cooling efficiency by avoiding the off-resonant and undesired carrier transitions, and thereby cool the cantilever down to the vicinity of the vibrational ground state in a fast fashion. PMID:26455901

  16. Segmentation of a Vibro-Shock Cantilever-Type Piezoelectric Energy Harvester Operating in Higher Transverse Vibration Modes

    PubMed Central

    Zizys, Darius; Gaidys, Rimvydas; Dauksevicius, Rolanas; Ostasevicius, Vytautas; Daniulaitis, Vytautas

    2015-01-01

    The piezoelectric transduction mechanism is a common vibration-to-electric energy harvesting approach. Piezoelectric energy harvesters are typically mounted on a vibrating host structure, whereby alternating voltage output is generated by a dynamic strain field. A design target in this case is to match the natural frequency of the harvester to the ambient excitation frequency for the device to operate in resonance mode, thus significantly increasing vibration amplitudes and, as a result, energy output. Other fundamental vibration modes have strain nodes, where the dynamic strain field changes sign in the direction of the cantilever length. The paper reports on a dimensionless numerical transient analysis of a cantilever of a constant cross-section and an optimally-shaped cantilever with the objective to accurately predict the position of a strain node. Total effective strain produced by both cantilevers segmented at the strain node is calculated via transient analysis and compared to the strain output produced by the cantilevers segmented at strain nodes obtained from modal analysis, demonstrating a 7% increase in energy output. Theoretical results were experimentally verified by using open-circuit voltage values measured for the cantilevers segmented at optimal and suboptimal segmentation lines. PMID:26703623

  17. Segmentation of a Vibro-Shock Cantilever-Type Piezoelectric Energy Harvester Operating in Higher Transverse Vibration Modes.

    PubMed

    Zizys, Darius; Gaidys, Rimvydas; Dauksevicius, Rolanas; Ostasevicius, Vytautas; Daniulaitis, Vytautas

    2015-12-23

    The piezoelectric transduction mechanism is a common vibration-to-electric energy harvesting approach. Piezoelectric energy harvesters are typically mounted on a vibrating host structure, whereby alternating voltage output is generated by a dynamic strain field. A design target in this case is to match the natural frequency of the harvester to the ambient excitation frequency for the device to operate in resonance mode, thus significantly increasing vibration amplitudes and, as a result, energy output. Other fundamental vibration modes have strain nodes, where the dynamic strain field changes sign in the direction of the cantilever length. The paper reports on a dimensionless numerical transient analysis of a cantilever of a constant cross-section and an optimally-shaped cantilever with the objective to accurately predict the position of a strain node. Total effective strain produced by both cantilevers segmented at the strain node is calculated via transient analysis and compared to the strain output produced by the cantilevers segmented at strain nodes obtained from modal analysis, demonstrating a 7% increase in energy output. Theoretical results were experimentally verified by using open-circuit voltage values measured for the cantilevers segmented at optimal and suboptimal segmentation lines.

  18. Bifurcation-enhanced ultrahigh sensitivity of a buckled cantilever

    PubMed Central

    An, Sangmin; Kim, Bongsu; Kwon, Soyoung; Moon, Geol; Lee, Manhee

    2018-01-01

    Buckling, first introduced by Euler in 1744 [Euler L (1744) Opera Omnia I 24:231], a sudden mechanical sideways deflection of a structural member under compressive stress, represents a bifurcation in the solution to the equations of static equilibrium. Although it has been investigated in diverse research areas, such a common nonlinear phenomenon may be useful to devise a unique mechanical sensor that addresses the still-challenging features, such as the enhanced sensitivity and polarization-dependent detection capability. We demonstrate the bifurcation-enhanced sensitive measurement of mechanical vibrations using the nonlinear buckled cantilever tip in ambient conditions. The cantilever, initially buckled with its tip pinned, flips its buckling near the bifurcation point (BP), where the buckled tip becomes softened. The enhanced mechanical sensitivity results from the increasing fluctuations, unlike the typical linear sensors, which facilitate the noise-induced buckling-to-flipping transition of the softened cantilever. This allows the in situ continuous or repeated single-shot detection of the surface acoustic waves of different polarizations without any noticeable wear of the tip. We obtained the sensitivity above 106 V(m/s)−1, a 1,000-fold enhancement over the conventional seismometers. Our results lead to development of mechanical sensors of high sensitivity, reproducibility, and durability, which may be applied to detect, e.g., the directional surface waves on the laboratory as well as the geological scale. PMID:29511105

  19. Electrical Control of g-Factor in a Few-Hole Silicon Nanowire MOSFET.

    PubMed

    Voisin, B; Maurand, R; Barraud, S; Vinet, M; Jehl, X; Sanquer, M; Renard, J; De Franceschi, S

    2016-01-13

    Hole spins in silicon represent a promising yet barely explored direction for solid-state quantum computation, possibly combining long spin coherence, resulting from a reduced hyperfine interaction, and fast electrically driven qubit manipulation. Here we show that a silicon-nanowire field-effect transistor based on state-of-the-art silicon-on-insulator technology can be operated as a few-hole quantum dot. A detailed magnetotransport study of the first accessible hole reveals a g-factor with unexpectedly strong anisotropy and gate dependence. We infer that these two characteristics could enable an electrically driven g-tensor-modulation spin resonance with Rabi frequencies exceeding several hundred mega-Hertz.

  20. Forced Vibrations of a Cantilever Beam

    ERIC Educational Resources Information Center

    Repetto, C. E.; Roatta, A.; Welti, R. J.

    2012-01-01

    The theoretical and experimental solutions for vibrations of a vertical-oriented, prismatic, thin cantilever beam are studied. The beam orientation is "downwards", i.e. the clamped end is above the free end, and it is subjected to a transverse movement at a selected frequency. Both the behaviour of the device driver and the beam's weak-damping…

  1. A wall shear stress sensor using a pair of sidewall doped cantilevers

    NASA Astrophysics Data System (ADS)

    Nguyen, Thanh-Vinh; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi; Shimoyama, Isao

    2017-07-01

    In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µm thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µm  ×  400 µm plate supported by two 150 µm long, 4 µm wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  -10 and 10 m s-1 is demonstrated.

  2. 16 CFR Figure 1 to Part 1512 - Bicycle Front Fork Cantilever Bending Test Rig

    Code of Federal Regulations, 2010 CFR

    2010-01-01

    ... 16 Commercial Practices 2 2010-01-01 2010-01-01 false Bicycle Front Fork Cantilever Bending Test Rig 1 Figure 1 to Part 1512 Commercial Practices CONSUMER PRODUCT SAFETY COMMISSION FEDERAL HAZARDOUS... Fork Cantilever Bending Test Rig EC03OC91.070 ...

  3. 16 CFR Figure 1 to Part 1512 - Bicycle Front Fork Cantilever Bending Test Rig

    Code of Federal Regulations, 2011 CFR

    2011-01-01

    ... 16 Commercial Practices 2 2011-01-01 2011-01-01 false Bicycle Front Fork Cantilever Bending Test Rig 1 Figure 1 to Part 1512 Commercial Practices CONSUMER PRODUCT SAFETY COMMISSION FEDERAL HAZARDOUS... Fork Cantilever Bending Test Rig EC03OC91.070 ...

  4. SU8 diaphragm micropump with monolithically integrated cantilever check valves.

    PubMed

    Ezkerra, Aitor; Fernández, Luis José; Mayora, Kepa; Ruano-López, Jesús Miguel

    2011-10-07

    This paper presents a SU8 unidirectional diaphragm micropump with embedded out-of-plane cantilever check valves. The device represents a reliable and low-cost solution for integration of microfluidic control in lab-on-a-chip devices. Its planar architecture allows monolithic definition of its components in a single step and potential integration with previously reported PCR, electrophoresis and flow-sensing SU8 microdevices. Pneumatic actuation is applied on a PDMS diaphragm, which is bonded to the SU8 body at wafer level, further enhancing its integration and mass production capabilities. The cantilever check valves move synchronously with the diaphragm, feature fast response (10ms), low dead volume (86nl) and a 94% flow blockage up to 300kPa. The micropump achieves a maximum flow rate of 177 μl min(-1) at 6 Hz and 200 kPa with an effective area of 10 mm(2). The device is reliable, self-priming and tolerant to particles and big bubbles. To the knowledge of the authors, this is the first micropump in SU8 with monolithically integrated cantilever check valves.

  5. Whole-Cell Electrical Activity Under Direct Mechanical Stimulus by AFM Cantilever Using Planar Patch Clamp Chip Approach

    PubMed Central

    Upadhye, Kalpesh V.; Candiello, Joseph E.; Davidson, Lance A.; Lin, Hai

    2011-01-01

    Patch clamp is a powerful tool for studying the properties of ion-channels and cellular membrane. In recent years, planar patch clamp chips have been fabricated from various materials including glass, quartz, silicon, silicon nitride, polydimethyl-siloxane (PDMS), and silicon dioxide. Planar patch clamps have made automation of patch clamp recordings possible. However, most planar patch clamp chips have limitations when used in combination with other techniques. Furthermore, the fabrication methods used are often expensive and require specialized equipments. An improved design as well as fabrication and characterization of a silicon-based planar patch clamp chip are described in this report. Fabrication involves true batch fabrication processes that can be performed in most common microfabrication facilities using well established MEMS techniques. Our planar patch clamp chips can form giga-ohm seals with the cell plasma membrane with success rate comparable to existing patch clamp techniques. The chip permits whole-cell voltage clamp recordings on variety of cell types including Chinese Hamster Ovary (CHO) cells and pheochromocytoma (PC12) cells, for times longer than most available patch clamp chips. When combined with a custom microfluidics chamber, we demonstrate that it is possible to perfuse the extra-cellular as well as intra-cellular buffers. The chamber design allows integration of planar patch clamp with atomic force microscope (AFM). Using our planar patch clamp chip and microfluidics chamber, we have recorded whole-cell mechanosensitive (MS) currents produced by directly stimulating human keratinocyte (HaCaT) cells using an AFM cantilever. Our results reveal the spatial distribution of MS ion channels and temporal details of the responses from MS channels. The results show that planar patch clamp chips have great potential for multi-parametric high throughput studies of ion channel proteins. PMID:22174731

  6. Knudsen pump produced via silicon deep RIE, thermal oxidation, and anodic bonding processes for on-chip vacuum pumping

    NASA Astrophysics Data System (ADS)

    Van Toan, Nguyen; Inomata, Naoki; Trung, Nguyen Huu; Ono, Takahito

    2018-05-01

    This work describes the fabrication and evaluation of the Knudsen pump for on-chip vacuum pumping that works based on the principle of a thermal transpiration. Three AFM (atomic force microscope) cantilevers are integrated into small chambers with a size of 5 mm  ×  3 mm  ×  0.4 mm for the pump’s evaluation. Knudsen pump is fabricated using deep RIE (reactive ion etching), wet thermal oxidation and anodic bonding processes. The fabricated device is evaluated by monitoring the quality (Q) factor of the integrated cantilevers. The Q factor of the cantilever is increased from 300 -1150 in cases without and with a temperature difference approximately 25 °C between the top (the hot side at 40 °C) and bottom (the cold side at 15 °C) sides of the fabricated device, respectively. The evacuated chamber pressure of around 10 kPa is estimated from the Q factor of the integrated cantilevers.

  7. An analytic model for accurate spring constant calibration of rectangular atomic force microscope cantilevers.

    PubMed

    Li, Rui; Ye, Hongfei; Zhang, Weisheng; Ma, Guojun; Su, Yewang

    2015-10-29

    Spring constant calibration of the atomic force microscope (AFM) cantilever is of fundamental importance for quantifying the force between the AFM cantilever tip and the sample. The calibration within the framework of thin plate theory undoubtedly has a higher accuracy and broader scope than that within the well-established beam theory. However, thin plate theory-based accurate analytic determination of the constant has been perceived as an extremely difficult issue. In this paper, we implement the thin plate theory-based analytic modeling for the static behavior of rectangular AFM cantilevers, which reveals that the three-dimensional effect and Poisson effect play important roles in accurate determination of the spring constants. A quantitative scaling law is found that the normalized spring constant depends only on the Poisson's ratio, normalized dimension and normalized load coordinate. Both the literature and our refined finite element model validate the present results. The developed model is expected to serve as the benchmark for accurate calibration of rectangular AFM cantilevers.

  8. Size-dependent resonance frequencies of cantilevered and bridged nanosensors

    NASA Astrophysics Data System (ADS)

    Shi, W.; Zou, J.; Lee, K. Y.; Li, X. F.

    2018-03-01

    This paper studies transverse vibration of nanoscale cantilevered and bridged sensors carrying a nanoparticle. The nanoscale sensors are modelled as Euler-Bernoulli beams with surface effect and nanoparticle as a concentrated mass. Frequency equations of cantilevered and bridged beam-mass system are derived and exact resonance frequencies are calculated. An alternative Fredholm integral equation method is used to obtain an approximate explicit expression for the fundamental frequency for both cases. A comparison between the approximate and analytical results is made and the approximation accuracy is satisfactory. The influences of the residual surface stress, surface elasticity, and attached mass on the resonance frequencies and mode shapes are discussed. These results are useful to illustrate the surface phenomena and are helpful to design micro-/nano-mechanical sensors.

  9. Fast optical cooling of nanomechanical cantilever with the dynamical Zeeman effect.

    PubMed

    Zhang, Jian-Qi; Zhang, Shuo; Zou, Jin-Hua; Chen, Liang; Yang, Wen; Li, Yong; Feng, Mang

    2013-12-02

    We propose an efficient optical electromagnetically induced transparency (EIT) cooling scheme for a cantilever with a nitrogen-vacancy center attached in a non-uniform magnetic field using dynamical Zeeman effect. In our scheme, the Zeeman effect combined with the quantum interference effect enhances the desired cooling transition and suppresses the undesired heating transitions. As a result, the cantilever can be cooled down to nearly the vibrational ground state under realistic experimental conditions within a short time. This efficient optical EIT cooling scheme can be reduced to the typical EIT cooling scheme under special conditions.

  10. Design and fabrication of non silicon substrate based MEMS energy harvester for arbitrary surface applications

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Balpande, Suresh S., E-mail: balpandes@rknec.edu; Pande, Rajesh S.

    Internet of Things (IoT) uses MEMS sensor nodes and actuators to sense and control objects through Internet. IOT deploys millions of chemical battery driven sensors at different locations which are not reliable many times because of frequent requirement of charging & battery replacement in case of underground laying, placement at harsh environmental conditions, huge count and difference between demand (24 % per year) and availability (energy density growing rate 8% per year). Energy harvester fabricated on silicon wafers have been widely used in manufacturing MEMS structures. These devices require complex fabrication processes, costly chemicals & clean room. In addition tomore » this silicon wafer based devices are not suitable for curved surfaces like pipes, human bodies, organisms, or other arbitrary surface like clothes, structure surfaces which does not have flat and smooth surface always. Therefore, devices based on rigid silicon wafers are not suitable for these applications. Flexible structures are the key solution for this problems. Energy transduction mechanism generates power from free surrounding vibrations or impact. Sensor nodes application has been purposefully selected due to discrete power requirement at low duty cycle. Such nodes require an average power budget in the range of about 0.1 microwatt to 1 mW over a period of 3-5 seconds. Energy harvester is the best alternate source in contrast with battery for sensor node application. Novel design of Energy Harvester based on cheapest flexible non silicon substrate i.e. cellulose acetate substrate have been modeled, simulated and analyzed on COMSOL multiphysics and fabricated using sol-gel spin coating setup. Single cantilever based harvester generates 60-75 mV peak electric potential at 22Hz frequency and approximately 22 µW power at 1K-Ohm load. Cantilever array can be employed for generating higher voltage by replicating this structure. This work covers design, optimization, fabrication of

  11. Cantilever spring constant calibration using laser Doppler vibrometry

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Ohler, Benjamin

    2007-06-15

    Uncertainty in cantilever spring constants is a critical issue in atomic force microscopy (AFM) force measurements. Though numerous methods exist for calibrating cantilever spring constants, the accuracy of these methods can be limited by both the physical models themselves as well as uncertainties in their experimental implementation. Here we report the results from two of the most common calibration methods, the thermal tune method and the Sader method. These were implemented on a standard AFM system as well as using laser Doppler vibrometry (LDV). Using LDV eliminates some uncertainties associated with optical lever detection on an AFM. It also offersmore » considerably higher signal to noise deflection measurements. We find that AFM and LDV result in similar uncertainty in the calibrated spring constants, about 5%, using either the thermal tune or Sader methods provided that certain limitations of the methods and instrumentation are observed.« less

  12. Growth of carbon nanofibers on tipless cantilevers: process development and applications in scanning probe microscopy

    NASA Astrophysics Data System (ADS)

    Cui, Hongtao; Kalinin, Sergei; Yang, Xiaojing; Lowndes, Douglas

    2005-03-01

    Carbon nanofibers (CNFs) are grown on tipless cantilevers as probe tips for scanning probe microscopy. A catalyst dot pattern is formed on the surface of the tipless cantilever using electron beam lithography and CNF growth is performed in a direct-current plasma enhanced chemical vapor deposition reactor. Because the CNF is aligned with the electric field near the edge of the cantilever during growth, it is tilted with respect to the cantilever surface, which compensates partially for the probe tilt introduced when used in scanning probe microscopy. CNFs with different shapes and tip radii can be produced by variation of experimental conditions. The tip geometries of the CNF probes are defined by their catalyst particles, whose magnetic nature also imparts a capability for imaging magnetic samples. We have demonstrated their use in both atomic force and magnetic force surface imaging. These probe tips may provide information on magnetic phenomena at the nanometer scale in connection with the drive for ever-increasing storage density of magnetic hard disks.

  13. Method of mechanical holding of cantilever chip for tip-scan high-speed atomic force microscope

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Fukuda, Shingo; Uchihashi, Takayuki; Ando, Toshio

    In tip-scan atomic force microscopy (AFM) that scans a cantilever chip in the three dimensions, the chip body is held on the Z-scanner with a holder. However, this holding is not easy for high-speed (HS) AFM because the holder that should have a small mass has to be able to clamp the cantilever chip firmly without deteriorating the Z-scanner’s fast performance, and because repeated exchange of cantilever chips should not damage the Z-scanner. This is one of the reasons that tip-scan HS-AFM has not been established, despite its advantages over sample stage-scan HS-AFM. Here, we present a novel method ofmore » cantilever chip holding which meets all conditions required for tip-scan HS-AFM. The superior performance of this novel chip holding mechanism is demonstrated by imaging of the α{sub 3}β{sub 3} subcomplex of F{sub 1}-ATPase in dynamic action at ∼7 frames/s.« less

  14. An analytical model of joule heating in piezoresistive microcantilevers.

    PubMed

    Ansari, Mohd Zahid; Cho, Chongdu

    2010-01-01

    The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever.

  15. Hydrogen-enhanced cracking revealed by in situ micro-cantilever bending test inside environmental scanning electron microscope

    NASA Astrophysics Data System (ADS)

    Deng, Yun; Hajilou, Tarlan; Barnoush, Afrooz

    2017-06-01

    To evaluate the hydrogen (H)-induced embrittlement in iron aluminium intermetallics, especially the one with stoichiometric composition of 50 at.% Al, a novel in situ micro-cantilever bending test was applied within an environmental scanning electron microscope (ESEM), which provides both a full process monitoring and a clean, in situ H-charging condition. Two sets of cantilevers were analysed in this work: one set of un-notched cantilevers, and the other set with focused ion beam-milled notch laying on two crystallographic planes: (010) and (110). The cantilevers were tested under two environmental conditions: vacuum (approximately 5 × 10-4 Pa) and ESEM (450 Pa water vapour). Crack initiation at stress-concentrated locations and propagation to cause catastrophic failure were observed when cantilevers were tested in the presence of H; while no cracking occurred when tested in vacuum. Both the bending strength for un-notched beams and the fracture toughness for notched beams were reduced under H exposure. The hydrogen embrittlement (HE) susceptibility was found to be orientation dependent: the (010) crystallographic plane was more fragile to HE than the (110) plane. This article is part of the themed issue 'The challenges of hydrogen and metals'.

  16. Investigation of static and dynamic behavior of functionally graded piezoelectric actuated Poly-Si micro cantilever probe

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Pandey, Vibhuti Bhushan; Parashar, Sandeep Kumar, E-mail: skparashar@rtu.ac.in

    In the present paper a novel functionally graded piezoelectric (FGP) actuated Poly-Si micro cantilever probe is proposed for atomic force microscope. The shear piezoelectric coefficient d{sub 15} has much higher value than coupling coefficients d{sub 31} and d{sub 33}, hence in the present work the micro cantilever beam actuated by d{sub 15} effect is utilized. The material properties are graded in the thickness direction of actuator by a simple power law. A three dimensional finite element analysis has been performed using COMSOL Multiphysics® (version 4.2) software. Tip deflection and free vibration analysis for the micro cantilever probe has been done.more » The results presented in the paper shall be useful in the design of micro cantilever probe and their subsequent utilization in atomic force microscopes.« less

  17. The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever

    NASA Astrophysics Data System (ADS)

    Palosaari, Jaakko; Leinonen, Mikko; Juuti, Jari; Jantunen, Heli

    2018-06-01

    In this research four piezoelectric bimorph type cantilevers for energy harvesting were manufactured, measured and analyzed to study the effects of substrate layer thickness on energy harvesting efficiency and durability under different accelerations. The cantilevers had the same dimensions of the piezoelectric ceramic components, but had different thicknesses of the steel substrate (no steel, 30 μm, 50 μm and 75 μm). The cantilevers were tuned to the same resonance frequency with different sizes of tip mass (2.13 g, 3.84 g, 4.17 g and 5.08 g). The energy harvester voltage outputs were then measured across an electrical load near to the resonance frequency (∼40 Hz) with sinusoidal vibrations under different accelerations. The stress exhibited by the four cantilevers was compared and analyzed and their durability was tested with accelerations up to 2.5 g-forces.

  18. Large Deflection of Ideal Pseudo-Elastic Shape Memory Alloy Cantilever Beam

    NASA Astrophysics Data System (ADS)

    Cui, Shitang; Hu, Liming; Yan, Jun

    This paper deals with the large deflections of pseudo-elastic shape memory alloy cantilever beams subjected to a concentrated load at the free end. Because of the large deflections, geometry nonlinearity arises and this analysis employs the nonlinear bending theory. The exact expression of curvature is used in the moment-curvature relationship. As a vertical force at the tip of cantilever, curvature and bending moment distribution expressions are deduced. The curvature changed distinctly when the surface material undergoes phase transformation. The length of phase transformation region was affected greatly with the force at the free end.

  19. Measurement and Evaluation of the Gas Density and Viscosity of Pure Gases and Mixtures Using a Micro-Cantilever Beam

    PubMed Central

    Badarlis, Anastasios; Pfau, Axel; Kalfas, Anestis

    2015-01-01

    Measurement of gas density and viscosity was conducted using a micro-cantilever beam. In parallel, the validity of the proposed modeling approach was evaluated. This study also aimed to widen the database of the gases on which the model development of the micro-cantilever beams is based. The density and viscosity of gases are orders of magnitude lower than liquids. For this reason, the use of a very sensitive sensor is essential. In this study, a micro-cantilever beam from the field of atomic force microscopy was used. Although the current cantilever was designed to work with thermal activation, in the current investigation, it was activated with an electromagnetic force. The deflection of the cantilever beam was detected by an integrated piezo-resistive sensor. Six pure gases and sixteen mixtures of them in ambient conditions were investigated. The outcome of the investigation showed that the current cantilever beam had a sensitivity of 240 Hz/(kg/m3), while the accuracy of the determined gas density and viscosity in ambient conditions reached ±1.5% and ±2.0%, respectively. PMID:26402682

  20. On the classification of normalized natural frequencies for damage detection in cantilever beam

    NASA Astrophysics Data System (ADS)

    Dahak, Mustapha; Touat, Noureddine; Benseddiq, Noureddine

    2017-08-01

    The presence of a damage on a beam causes changes in the physical properties, which introduce flexibility, and reduce the natural frequencies of the beam. Based on this, a new method is proposed to locate the damage zone in a cantilever beam. In this paper, the cantilever beam is discretized into a number of zones, where each zone has a specific classification of the first four normalized natural frequencies. The damaged zone is distinguished by only the classification of the normalized frequencies of the structure. In the case when the damage is symmetric to the vibration node, we use the unchanged natural frequency as a second information to obtain a more accurate location. The effectiveness of the proposed method is shown by a numerical simulation with ANSYS software and experimental investigation of a cantilever beam with different damage.

  1. Influence of cantilevered sheet pile deflection on adjacent roadways.

    DOT National Transportation Integrated Search

    2009-06-01

    Cantilevered sheet pile walls are often used adjacent roadways as temporary support during construction. Excess movement of these walls has led to excessive roadway distress causing additional repairs to be necessary. This study assessed the effects ...

  2. Dynamic modelling and experimental study of cantilever beam with clearance

    NASA Astrophysics Data System (ADS)

    Li, B.; Jin, W.; Han, L.; He, Z.

    2012-05-01

    Clearances occur in almost all mechanical systems, typically such as the clearance between slide plate of gun barrel and guide. Therefore, to study the clearances of mechanisms can be very important to increase the working performance and lifetime of mechanisms. In this paper, rigid dynamic modelling of cantilever with clearance was done according to the subject investigated. In the rigid dynamic modelling, clearance is equivalent to the spring-dashpot model, the impact of beam and boundary face was also taken into consideration. In ADAMS software, the dynamic simulation was carried out according to the model above. The software simulated the movement of cantilever with clearance under external excitation. Research found: When the clearance is larger, the force of impact will become larger. In order to study how the stiffness of the cantilever's supporting part influences natural frequency of the system, A Euler beam which is restricted by a draught spring and a torsion spring at its end was raised. Through numerical calculation, the relationship between natural frequency and stiffness was found. When the value of the stiffness is close to the limit value, the corresponding boundary condition is illustrated. An ADAMS experiment was carried out to check the theory and the simulation.

  3. Hydrogen-enhanced cracking revealed by in situ micro-cantilever bending test inside environmental scanning electron microscope.

    PubMed

    Deng, Yun; Hajilou, Tarlan; Barnoush, Afrooz

    2017-07-28

    To evaluate the hydrogen (H)-induced embrittlement in iron aluminium intermetallics, especially the one with stoichiometric composition of 50 at.% Al, a novel in situ micro-cantilever bending test was applied within an environmental scanning electron microscope (ESEM), which provides both a full process monitoring and a clean, in situ H-charging condition. Two sets of cantilevers were analysed in this work: one set of un-notched cantilevers, and the other set with focused ion beam-milled notch laying on two crystallographic planes: (010) and (110). The cantilevers were tested under two environmental conditions: vacuum (approximately 5 × 10 -4  Pa) and ESEM (450 Pa water vapour). Crack initiation at stress-concentrated locations and propagation to cause catastrophic failure were observed when cantilevers were tested in the presence of H; while no cracking occurred when tested in vacuum. Both the bending strength for un-notched beams and the fracture toughness for notched beams were reduced under H exposure. The hydrogen embrittlement (HE) susceptibility was found to be orientation dependent: the (010) crystallographic plane was more fragile to HE than the (110) plane.This article is part of the themed issue 'The challenges of hydrogen and metals'. © 2017 The Author(s).

  4. RISK FACTORS FOR CONTACT LENS INDUCED PAPILLARY CONJUNCTIVITIS ASSOCIATED WITH SILICONE HYDROGEL CONTACT LENS WEAR

    PubMed Central

    Tagliaferri, Angela; Love, Thomas E.; Szczotka-Flynn, Loretta

    2014-01-01

    BACKGROUND Contact lens induced papillary conjunctivitis (CLPC) continues to be a major cause of dropout during contact lens extended wear. This retrospective study explores risk factors for the development of CLPC during silicone hydrogel lens extended wear. METHODS Data from 205 subjects enrolled in the Longitudinal Analysis of Silicone Hydrogel Contact Lens (LASH) study wearing lotrafilcon A silicone hydrogel lenses for up to 30 days of continuous wear were used to determine risk factors for CLPC in this secondary analysis of the main cohort. The main covariates of interest included substantial lens-associated bacterial bioburden, and topographically determined lens base curve-to-cornea fitting relationships. Additional covariates of interest included history of prior adverse events, time of year, race, education level, gender and other subject demographics. Statistical analyses included univariate logistic regression to assess the impact of potential risk factors on the binary CLPC outcome, and Cox proportional hazards regression to describe the impact of those factors on time-to-CLPC diagnosis. RESULTS Across 12 months of follow-up, 52 subjects (25%) experienced CLPC. No associations were found between CLPC development and the presence of bacterial bioburden, lens-to-cornea fitting relationships, history of prior adverse events, gender or race. CLPC development followed the same seasonal trends as the local peaks in environmental allergans. CONCLUSIONS Lens fit and biodeposits, in the form of lens associated bacterial bioburden, were not associated with the development of CLPC during extended wear with lotrafilcon A silicone hydrogel lenses. PMID:24681609

  5. An ultra-sensitive DeltaR/R measurement system for biochemical sensors using piezoresistive micro-cantilevers.

    PubMed

    Nag, Sudip; Kale, Nitin S; Rao, V; Sharma, Dinesh K

    2009-01-01

    Piezoresistive micro-cantilevers are interesting bio-sensing tool whose base resistance value (R) changes by a few parts per million (DeltaR) in deflected conditions. Measuring such a small deviation is always being a challenge due to noise. An advanced and reliable DeltaR/R measurement scheme is presented in this paper which can sense resistance changes down to 6 parts per million. The measurement scheme includes the half-bridge connected micro-cantilevers with mismatch compensation, precision op-amp based filters and amplifiers, and a lock-in amplifier based detector. The input actuating sine wave is applied from a function generator and the output dc voltage is displayed on a digital multimeter. The calibration is performed and instrument sensitivity is calculated. An experimental set-up using a probe station is discussed that demonstrates a combined performance of the measurement system and SU8-polysilicon cantilevers. The deflection sensitivity of such polymeric cantilevers is calculated. The system will be highly useful to detect bio-markers such as myoglobin and troponin that are released in blood during or after heart attacks.

  6. An Analytical Model of Joule Heating in Piezoresistive Microcantilevers

    PubMed Central

    Ansari, Mohd Zahid; Cho, Chongdu

    2010-01-01

    The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever. PMID:22163433

  7. 9. View looking east down cantilevered walkway. Jack Boucher, photographer, ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    9. View looking east down cantilevered walkway. Jack Boucher, photographer, 1977 - Neshanic Station Lenticular Truss Bridge, State Route 567, spanning South Branch of Raritan River, Neshanic Station, Somerset County, NJ

  8. Near-Field Acoustical Imaging using Lateral Bending Mode of Atomic Force Microscope Cantilevers

    NASA Astrophysics Data System (ADS)

    Caron, A.; Rabe, U.; Rödel, J.; Arnold, W.

    Scanning probe microscopy techniques enable one to investigate surface properties such as contact stiffness and friction between the probe tip and a sample with nm resolution. So far the bending and the torsional eigenmodes of an atomic force microscope cantilever have been used to image variations of elasticity and shear elasticity, respectively. Such images are near-field images with the resolution given by the contact radius typically between 10 nm and 50 nm. We show that the flexural modes of a cantilever oscillating in the width direction and parallel to the sample surface can also be used for imaging. Additional to the dominant in-plane component of the oscillation, the lateral modes exhibit a vertical component as well, provided there is an asymmetry in the cross-section of the cantilever or in its suspension. The out-of-plane deflection renders the lateral modes detectable by the optical position sensors used in atomic force microscopes. We studied cracks which were generated by Vickers indents, in submicro- and nanocrystalline ZrO2. Images of the lateral contact stiffness were obtained by vibrating the cantilever close to a contact-resonance frequency. A change in contact stiffness causes a shift of the resonant frequency and hence a change of the cantilever vibration amplitude. The lateral contact-stiffness images close to the crack faces display a contrast that we attribute to altered elastic properties indicating a process zone. This could be caused by a stress-induced phase transformation during crack propagation. Using the contact mode of an atomic force microscope, we measured the crack-opening displacement as a function of distance from the crack tip, and we determined the crack-tip toughness Ktip. Furthermore, K1c was inferred from the length of radial cracks of Vickers indents that were measured using classical scanning acoustic microscopy

  9. Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

    NASA Astrophysics Data System (ADS)

    Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

    2018-04-01

    This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

  10. Design and experimental evaluation of flextensional-cantilever based piezoelectric transducers for flow energy harvesting

    NASA Astrophysics Data System (ADS)

    Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Colonius, Tim

    2016-04-01

    Cantilever type piezoelectric harvesters, such as bimorphs, are typically used for vibration induced energy harvesting. However, a major drawback of a piezoelectric bimorph is its brittle nature in harsh environments, precipitating short life-times as well as output power degradation. The emphasis in this work is to design robust, highly efficient piezoelectric harvesters that are capable of generating electrical power in the milliwatt range. Various harvesters were modeled, designed and prototyped, and the flextensional actuator based harvester, where the metal cantilever is mounted and coupled between two flextensional actuators, was found to be a viable alternative to the cantilever type piezoelectric harvesters. Preliminary tests show that these devices equipped with 5x5x36 mm two piezoelectric PZT stacks can produce greater than 50 mW of power under air flow induced vibrations.

  11. Vibrations of cantilevered circular cylindrical shells Shallow versus deep shell theory

    NASA Technical Reports Server (NTRS)

    Lee, J. K.; Leissa, A. W.; Wang, A. J.

    1983-01-01

    Free vibrations of cantilevered circular cylindrical shells having rectangular planforms are studied in this paper by means of the Ritz method. The deep shell theory of Novozhilov and Goldenveizer is used and compared with the usual shallow shell theory for a wide range of shell parameters. A thorough convergence study is presented along with comparisons to previously published finite element solutions and experimental results. Accurately computed frequency parameters and mode shapes for various shell configurations are presented. The present paper appears to be the first comprehensive study presenting rigorous comparisons between the two shell theories in dealing with free vibrations of cantilevered cylindrical shells.

  12. Study of Effects of Sweep on the Flutter of Cantilever Wings

    NASA Technical Reports Server (NTRS)

    Barmby, J G; Cunningham, H J; Garrick, I E

    1951-01-01

    An experimental and analytical investigation of the flutter of sweptback cantilever wings is reported. The experiments employed groups of wings swept back by rotating and by shearing. The angle of sweep range from 0 degree to 60 degrees and Mach numbers extended to approximately 0.85. A theoretical analysis of the air forces on an oscillating swept wing of high length-chord ratio is developed, and the approximations inherent in the assumptions are discussed. Comparison with experiment indicates that the analysis developed in the present report is satisfactory for giving the main effects of sweep, at least for nearly uniform cantilever wings of high and moderate length-chord ratios.

  13. The complete process of large elastic-plastic deflection of a cantilever

    NASA Astrophysics Data System (ADS)

    Wu, Xiaoqiang; Yu, Tongxi

    1986-11-01

    An extension of the Elastica theory is developed to study the large deflection of an elastic-perfectly plastic horizontal cantilever beam subjected to a vertical concentrated force at its tip. The entire process is divided into four stages: I.elastic in the whole cantilever; II.loading and developing of the plastic region; III.unloading in the plastic region; and IV.reverse loading. Solutions for stages I and II are presented in a closed form. A combination of closed-form solution and numerical integration is presented for stage III. Finally, stage IV is qualitatively studied. Computed results are given and compared with those from small-deflection theory and from the Elastica theory.

  14. Direct and quantitative broadband absorptance spectroscopy with multilayer cantilever probes

    DOEpatents

    Hsu, Wei-Chun; Tong, Jonathan Kien-Kwok; Liao, Bolin; Chen, Gang

    2015-04-21

    A system for measuring the absorption spectrum of a sample is provided that includes a broadband light source that produces broadband light defined within a range of an absorptance spectrum. An interferometer modulates the intensity of the broadband light source for a range of modulation frequencies. A bi-layer cantilever probe arm is thermally connected to a sample arm having at most two layers of materials. The broadband light modulated by the interferometer is directed towards the sample and absorbed by the sample and converted into heat, which causes a temperature rise and bending of the bi-layer cantilever probe arm. A detector mechanism measures and records the deflection of the probe arm so as to obtain the absorptance spectrum of the sample.

  15. Laser-induced amorphization of silicon during pulsed-laser irradiation of TiN/Ti/polycrystalline silicon/SiO2/silicon

    NASA Astrophysics Data System (ADS)

    Chong, Y. F.; Pey, K. L.; Wee, A. T. S.; Thompson, M. O.; Tung, C. H.; See, A.

    2002-11-01

    In this letter, we report on the complex solidification structures formed during laser irradiation of a titanium nitride/titanium/polycrystalline silicon/silicon dioxide/silicon film stack. Due to enhanced optical coupling, the titanium nitride/titanium capping layer increases the melt depth of polycrystalline silicon by more than a factor of 2. It is found that the titanium atoms diffuse through the entire polycrystalline silicon layer during irradiation. Contrary to the expected polycrystalline silicon growth, distinct regions of polycrystalline and amorphous silicon are formed instead. Possible mechanisms for the formation of these microstructures are proposed.

  16. Determination of Fluid Density and Viscosity by Analyzing Flexural Wave Propagations on the Vibrating Micro-Cantilever

    PubMed Central

    Kim, Deokman; Hong, Seongkyeol; Park, Junhong

    2017-01-01

    The determination of fluid density and viscosity using most cantilever-based sensors is based on changes in resonant frequency and peak width. Here, we present a wave propagation analysis using piezoelectrically excited micro-cantilevers under distributed fluid loading. The standing wave shapes of microscale-thickness cantilevers partially immersed in liquids (water, 25% glycerol, and acetone), and nanoscale-thickness microfabricated cantilevers fully immersed in gases (air at three different pressures, carbon dioxide, and nitrogen) were investigated to identify the effects of fluid-structure interactions to thus determine the fluid properties. This measurement method was validated by comparing with the known fluid properties, which agreed well with the measurements. The relative differences for the liquids were less than 4.8% for the densities and 3.1% for the viscosities, and those for the gases were less than 6.7% for the densities and 7.3% for the viscosities, showing better agreements in liquids than in gases. PMID:29077005

  17. Energy harvesting from the interaction of a Lamb dipole with a flexible cantilever

    NASA Astrophysics Data System (ADS)

    Tang, Hui; Wang, Chenglei

    2017-11-01

    Energy harvesting from interactions of coherent flow structures with flexible solid structures can be used for powering miniature electronic devices. Although effective, the fundamental mechanism of such an energy extraction process has not been fully understood. Therefore, this study aims to provide more physical insights into this problem. The coherent flow structure is represented by a Lamb dipole, and the solid structure is assumed as a two-dimensional flexible cantilever. The cantilever is placed along the propagation direction of the dipole, with its fixed end initially towards or away from the dipole and its lateral distance from the dipole center varied. As the dipole passes through the cantilever, the latter can extract energy from the former through effective interactions. Such a two-dimensional fluid-structure interaction problem is numerically studied at a low Reynolds number of 200 using a lattice Boltzmann method (LBM) based numerical framework. The simulation results reveal that the flexible cantilever with a moderate stiffness is more beneficial to the energy harvesting, and it can scavenge more energy from the ambient vortices when its fixed end is initially away from the dipole with a relatively small lateral distance. The authors gratefully acknowledge the financial support for this study from the Research Grants Council of Hong Kong under General Research Fund (Project No. PolyU 152493/16E).

  18. Frequency Invariability of (Pb,La)(Zr,Ti)O₃ Antiferroelectric Thick-Film Micro-Cantilevers.

    PubMed

    An, Kun; Jin, Xuechen; Meng, Jiang; Li, Xiao; Ren, Yifeng

    2018-05-13

    Micro-electromechanical systems comprising antiferroelectric layers can offer both actuation and transduction to integrated technologies. Micro-cantilevers based on the (Pb 0.97 La 0.02 )(Zr 0.95 Ti 0.05 )O₃ (PLZT) antiferroelectric thick film are fabricated by the micro-nano manufacturing process, to utilize the effect of phase transition induced strain and sharp phase switch of antiferroelectric materials. When micro-cantilevers made of antiferroelectric thick films were driven by sweep voltages, there were two resonant peaks corresponding to the natural frequency shift from 27.8 to 27.0 kHz, before and after phase transition. This is the compensation principle for the PLZT micro-cantilever to tune the natural frequency by the amplitude modulation of driving voltage, rather than of frequency modulation. Considering the natural frequency shift about 0.8 kHz and the frequency tuning ability about 156 Hz/V before the phase transition, this can compensate the frequency shift caused by increasing temperature by tuning only the amplitude of driving voltage, when the ultrasonic micro-transducer made of antiferroelectric thick films works for such a long period. Therefore, antiferroelectric thick films with hetero-structures incorporated into PLZT micro-cantilevers not only require a lower driving voltage (no more than 40 V) than rival bulk piezoelectric ceramics, but also exhibit better performance of frequency invariability, based on the amplitude modulation.

  19. Expanding torque possibilities: A skeletally anchored torqued cantilever for uprighting "kissing molars".

    PubMed

    Barros, Sérgio Estelita; Janson, Guilherme; Chiqueto, Kelly; Ferreira, Eduardo; Rösing, Cassiano

    2018-04-01

    Several uprighting mechanics and devices have been used for repositioning tipped molars. "Kissing molars" (KMs) are an uncommon tooth impaction involving 2 severely tipped mandibular molars with their occlusal surfaces positioned crown to crown, with the roots pointing in opposite directions. Orthodontic uprighting of KMs has not been a usual treatment protocol, and it can be a challenging task due to the severe tipping and double impaction, requiring efficient and well-controlled uprighting mechanics. An innovative skeletally anchored cantilever, which uses the torque principle for uprighting tipped molars, is suggested. This torqued cantilever is easy to manufacture, install, and activate; it is a well-known torque that is effective for producing root movement. A successful treatment of symptomatic KMs, involving the first and second molars, was achieved with this cantilever. Thus, clinicians should consider the suggested uprighting mechanics and orthodontic device as a more conservative alternative to extraction of KMs, depending on the patient's age, involved teeth in KMs, tipping severity, and impaction positions. Copyright © 2018 American Association of Orthodontists. Published by Elsevier Inc. All rights reserved.

  20. DETAIL OF NORTH SAN GABRIEL RIVER BRIDGE, CANTILEVER SPAN CONNECTION, ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    DETAIL OF NORTH SAN GABRIEL RIVER BRIDGE, CANTILEVER SPAN CONNECTION, LOOKING SOUTHEAST. - North San Gabriel River Bridge, Spanning North Fork of San Gabriel River at Business Route 35, Georgetown, Williamson County, TX

  1. A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

    NASA Astrophysics Data System (ADS)

    Yi, Zhenxiang; Liao, Xiaoping

    2013-03-01

    In this paper, a novel capacitive power sensor based on the microelectromechanical systems (MEMS) cantilever beam at 8-12 GHz is proposed, fabricated and tested. The presented design can not only realize a cantilever beam instead of the conventional fixed-fixed beam, but also provide fine compatibility with the GaAs monolithic microwave integrated circuit (MMIC) process. When the displacement of the cantilever beam is very small compared with the initial height of the air gap, the capacitance change between the measuring electrode and the cantilever beam has an approximately linear dependence on the incident radio frequency (RF) power. Impedance compensating technology, by modifying the slot width of the coplanar waveguide transmission line, is adopted to minimize the effect of the cantilever beam on the power sensor; its validity is verified by the simulation of high frequency structure simulator software. The power sensor has been fabricated successfully by Au surface micromachining using polyimide as the sacrificial layer on the GaAs substrate. Optimization of the design with impedance compensating technology has resulted in a measured return loss of less than -25 dB and an insertion loss of around 0.1 dB at 8-12 GHz, which shows the slight effect of the cantilever beam on the microwave performance of this power sensor. The measured capacitance change starts from 0.7 fF to 1.3 fF when the incident RF power increases from 100 to 200 mW and an approximate linear dependence has been obtained. The measured sensitivities of the sensor are about 6.16, 6.27 and 6.03 aF mW-1 at 8, 10 and 12 GHz, respectively.

  2. Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer.

    PubMed

    Zhao, Rui; Sun, Ying

    2018-02-03

    In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS) was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10 -7 nm -1 , respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG). The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD) of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances.

  3. Polymeric Flexible Immunosensor Based on Piezoresistive Micro-Cantilever with PEDOT/PSS Conductive Layer

    PubMed Central

    Sun, Ying

    2018-01-01

    In this paper, a fully polymeric micro-cantilever with the surface passivation layer of parylene-C and the strain resistor of poly(3,4-ethylenedioxythiophene)/poly (styrene sulfonate) (PEDOT/PSS) was proposed and demonstrated for immunoassays. By optimizing the design and fabrication of the polymeric micro-cantilever, a square resistance of 220 Ω/□ for PEDOT/PSS conductive layer have been obtained. The experimental spring constant and the deflection sensitivity were measured to be 0.017 N/m and 8.59 × 10−7 nm−1, respectively. The biological sensing performances of polymeric micro-cantilever were investigated by the immunoassay for human immunoglobulin G (IgG). The immunosensor was experimentally demonstrated to have a linear behavior for the detection of IgG within the concentrations of 10~100 ng/mL with a limit of detection (LOD) of 10 ng/mL. The experimental results indicate that the proposed polymeric flexible conductive layer-based sensors are capable of detecting trace biological substances. PMID:29401669

  4. View from underneath bridge on west side shows cantilevered steel ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    View from underneath bridge on west side shows cantilevered steel supports for sidewalk above. - Raging River Bridge No. 234A, Preston-Fall City Road & Southeast Forty-fourth Place, Fall City, King County, WA

  5. Fully additive manufacture of a polymer cantilever with an embedded functional layer

    NASA Astrophysics Data System (ADS)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Horii, Yoshinori; Ushijima, Hirobumi

    2018-03-01

    In this paper, we report on an efficient and unique printing-based process for fabricating a cantilever structure with an embedded functional layer. The process is used to form a micro suspended structure via the one-batch transfer of stacked layers from a dummy substrate. The mechanism of the transfer process is clearly explained by the order of adhesion strengths of all interfaces. As a demonstration, a strain gauge which consisted of a polymer cantilever with an embedded conductive wire was successfully fabricated. It is expected that the proposed process will widely contribute to the efficient manufacture of useful sensors and actuators.

  6. DETAIL OF SOUTH SAN GABRIEL RIVER BRIDGE, CANTILEVER SPAN CONNECTION, ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    DETAIL OF SOUTH SAN GABRIEL RIVER BRIDGE, CANTILEVER SPAN CONNECTION, LOOKING NORTHWEST. - South San Gabriel River Bridge, Spanning South Fork of San Gabriel River at Georgetown at Business Route 35, Georgetown, Williamson County, TX

  7. Energy Harvesting from Energetic Porous Silicon

    DTIC Science & Technology

    2016-07-01

    ignition. Here we investigate a means to convert this mechanical energy to electrical energy via a piezoelectric cantilever and rectifying circuit. This...mechanical energy to electrical energy via a piezoelectric cantilever and an associated rectifying circuit. A small PSi sample is placed on the...cantilever is wired to a direct current (DC) full-bridge rectifier circuit (EHE001NC) also purchased from Midé. Test points have been added at the

  8. Computational model for noncontact atomic force microscopy: energy dissipation of cantilever.

    PubMed

    Senda, Yasuhiro; Blomqvist, Janne; Nieminen, Risto M

    2016-09-21

    We propose a computational model for noncontact atomic force microscopy (AFM) in which the atomic force between the cantilever tip and the surface is calculated using a molecular dynamics method, and the macroscopic motion of the cantilever is modeled by an oscillating spring. The movement of atoms in the tip and surface is connected with the oscillating spring using a recently developed coupling method. In this computational model, the oscillation energy is dissipated, as observed in AFM experiments. We attribute this dissipation to the hysteresis and nonconservative properties of the interatomic force that acts between the atoms in the tip and sample surface. The dissipation rate strongly depends on the parameters used in the computational model.

  9. A method to measure cellular adhesion utilizing a polymer micro-cantilever

    NASA Astrophysics Data System (ADS)

    Gaitas, Angelo; Malhotra, Ricky; Pienta, Kenneth

    2013-09-01

    In the present study we engineered a micro-machined polyimide cantilever with an embedded sensing element to investigate cellular adhesion, in terms of its relative ability to stick to a cross-linker, 3,3'-dithiobis[sulfosuccinimidylpropionate], coated on the cantilever surface. To achieve this objective, we investigated adhesive properties of three human prostate cancer cell lines, namely, a bone metastasis derived human prostate cancer cell line (PC3), a brain metastasis derived human prostate cancer cell line (DU145), and a subclone of PC3 (PC3-EMT14). We found that PC3-EMT14, which displays a mesenchymal phenotype, has the least adhesion compared to PC3 and DU145, which exhibit an epithelial phenotype.

  10. Precise mass determination of single cell with cantilever-based microbiosensor system.

    PubMed

    Łabędź, Bogdan; Wańczyk, Aleksandra; Rajfur, Zenon

    2017-01-01

    Having determined the mass of a single cell of brewer yeast Saccharomyces cerevisiae by means of a microcantilever-based biosensor Cantisens CSR-801 (Concentris, Basel, Switzerland), it was found that its dry mass is 47,65 ± 1,05 pg. Found to be crucial in this mass determination was the cell position along the length of the cantilever. Moreover, calculations including cells positions on the cantilever provide a threefold better degree of accuracy than those which assume uniform mass distribution. We have also examined the influence of storage time on the single cell mass. Our results show that after 6 months there is an increase in the average mass of a single yeast cell.

  11. Q factor limitation at short wavelength (around 300 nm) in III-nitride-on-silicon photonic crystal cavities

    NASA Astrophysics Data System (ADS)

    Tabataba-Vakili, Farsane; Roland, Iannis; Tran, Thi-Mo; Checoury, Xavier; El Kurdi, Moustafa; Sauvage, Sébastien; Brimont, Christelle; Guillet, Thierry; Rennesson, Stéphanie; Duboz, Jean-Yves; Semond, Fabrice; Gayral, Bruno; Boucaud, Philippe

    2017-09-01

    III-nitride-on-silicon L3 photonic crystal cavities with resonances down to 315 nm and quality factors (Q) up to 1085 at 337 nm have been demonstrated. The reduction of the quality factor with decreasing wavelength is investigated. Besides the quantum well absorption below 340 nm, a noteworthy contribution is attributed to the residual absorption present in thin AlN layers grown on silicon, as measured by spectroscopic ellipsometry. This residual absorption ultimately limits the Q factor to around 2000 at 300 nm when no active layer is present.

  12. 19. DETAIL OF SOUTH CANTILEVER ANCHOR ARM UPPER CHORD AND ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    19. DETAIL OF SOUTH CANTILEVER ANCHOR ARM UPPER CHORD AND ENDPOST CONNECTION U-19, LOOKING SOUTHWEST - Jackson's Ferry Bridge, Route 52 over New River, 6.3 miles south of Route 94, Austinville, Wythe County, VA

  13. Effective light absorption and its enhancement factor for silicon nanowire-based solar cell.

    PubMed

    Duan, Zhiqiang; Li, Meicheng; Mwenya, Trevor; Fu, Pengfei; Li, Yingfeng; Song, Dandan

    2016-01-01

    Although nanowire (NW) antireflection coating can enhance light trapping capability, which is generally used in crystal silicon (CS) based solar cells, whether it can improve light absorption in the CS body depends on the NW geometrical shape and their geometrical parameters. In order to conveniently compare with the bare silicon, two enhancement factors E(T) and E(A) are defined and introduced to quantitatively evaluate the efficient light trapping capability of NW antireflective layer and the effective light absorption capability of CS body. Five different shapes (cylindrical, truncated conical, convex conical, conical, and concave conical) of silicon NW arrays arranged in a square are studied, and the theoretical results indicate that excellent light trapping does not mean more light can be absorbed in the CS body. The convex conical NW has the best light trapping, but the concave conical NW has the best effective light absorption. Furthermore, if the cross section of silicon NW is changed into a square, both light trapping and effective light absorption are enhanced, and the Eiffel Tower shaped NW arrays have optimal effective light absorption.

  14. Correction factors to convert microdosimetry measurements in silicon to tissue in 12C ion therapy.

    PubMed

    Bolst, David; Guatelli, Susanna; Tran, Linh T; Chartier, Lachlan; Lerch, Michael L F; Matsufuji, Naruhiro; Rosenfeld, Anatoly B

    2017-03-21

    Silicon microdosimetry is a promising technology for heavy ion therapy (HIT) quality assurance, because of its sub-mm spatial resolution and capability to determine radiation effects at a cellular level in a mixed radiation field. A drawback of silicon is not being tissue-equivalent, thus the need to convert the detector response obtained in silicon to tissue. This paper presents a method for converting silicon microdosimetric spectra to tissue for a therapeutic 12 C beam, based on Monte Carlo simulations. The energy deposition spectra in a 10 μm sized silicon cylindrical sensitive volume (SV) were found to be equivalent to those measured in a tissue SV, with the same shape, but with dimensions scaled by a factor κ equal to 0.57 and 0.54 for muscle and water, respectively. A low energy correction factor was determined to account for the enhanced response in silicon at low energy depositions, produced by electrons. The concept of the mean path length [Formula: see text] to calculate the lineal energy was introduced as an alternative to the mean chord length [Formula: see text] because it was found that adopting Cauchy's formula for the [Formula: see text] was not appropriate for the radiation field typical of HIT as it is very directional. [Formula: see text] can be determined based on the peak of the lineal energy distribution produced by the incident carbon beam. Furthermore it was demonstrated that the thickness of the SV along the direction of the incident 12 C ion beam can be adopted as [Formula: see text]. The tissue equivalence conversion method and [Formula: see text] were adopted to determine the RBE 10 , calculated using a modified microdosimetric kinetic model, applied to the microdosimetric spectra resulting from the simulation study. Comparison of the RBE 10 along the Bragg peak to experimental TEPC measurements at HIMAC, NIRS, showed good agreement. Such agreement demonstrates the validity of the developed tissue equivalence correction factors and of

  15. Correction factors to convert microdosimetry measurements in silicon to tissue in 12C ion therapy

    NASA Astrophysics Data System (ADS)

    Bolst, David; Guatelli, Susanna; Tran, Linh T.; Chartier, Lachlan; Lerch, Michael L. F.; Matsufuji, Naruhiro; Rosenfeld, Anatoly B.

    2017-03-01

    Silicon microdosimetry is a promising technology for heavy ion therapy (HIT) quality assurance, because of its sub-mm spatial resolution and capability to determine radiation effects at a cellular level in a mixed radiation field. A drawback of silicon is not being tissue-equivalent, thus the need to convert the detector response obtained in silicon to tissue. This paper presents a method for converting silicon microdosimetric spectra to tissue for a therapeutic 12C beam, based on Monte Carlo simulations. The energy deposition spectra in a 10 μm sized silicon cylindrical sensitive volume (SV) were found to be equivalent to those measured in a tissue SV, with the same shape, but with dimensions scaled by a factor κ equal to 0.57 and 0.54 for muscle and water, respectively. A low energy correction factor was determined to account for the enhanced response in silicon at low energy depositions, produced by electrons. The concept of the mean path length < {{l}\\text{Path}}> to calculate the lineal energy was introduced as an alternative to the mean chord length < l> because it was found that adopting Cauchy’s formula for the < l> was not appropriate for the radiation field typical of HIT as it is very directional. < {{l}\\text{Path}}> can be determined based on the peak of the lineal energy distribution produced by the incident carbon beam. Furthermore it was demonstrated that the thickness of the SV along the direction of the incident 12C ion beam can be adopted as < {{l}\\text{Path}}> . The tissue equivalence conversion method and < {{l}\\text{Path}}> were adopted to determine the RBE10, calculated using a modified microdosimetric kinetic model, applied to the microdosimetric spectra resulting from the simulation study. Comparison of the RBE10 along the Bragg peak to experimental TEPC measurements at HIMAC, NIRS, showed good agreement. Such agreement demonstrates the validity of the developed tissue equivalence correction factors and of the determination of < {{l}\\text{Path}}> .

  16. 20. DETAIL OF SOUTH CANTILEVER ANCHOR ARM UPPER CHORD, POST, ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    20. DETAIL OF SOUTH CANTILEVER ANCHOR ARM UPPER CHORD, POST, AND DIAGONAL CONNECTION U-17, LOOKING NORTHWEST - Jackson's Ferry Bridge, Route 52 over New River, 6.3 miles south of Route 94, Austinville, Wythe County, VA

  17. Precise and direct method for the measurement of the torsion spring constant of the atomic force microscopy cantilevers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Jarząbek, D. M., E-mail: djarz@ippt.pan.pl

    2015-01-15

    A direct method for the evaluation of the torsional spring constants of the atomic force microscope cantilevers is presented in this paper. The method uses a nanoindenter to apply forces at the long axis of the cantilever and in the certain distance from it. The torque vs torsion relation is then evaluated by the comparison of the results of the indentations experiments at different positions on the cantilever. Next, this relation is used for the precise determination of the torsional spring constant of the cantilever. The statistical analysis shows that the standard deviation of the calibration measurements is equal tomore » approximately 1%. Furthermore, a simple method for calibration of the photodetector’s lateral response is proposed. The overall procedure of the lateral calibration constant determination has the accuracy approximately equal to 10%.« less

  18. Cantilever Wings for Modern Aircraft: Some Aspects of Cantilever Wing Construction with Special Reference to Weight and Torsional Stiffness

    NASA Technical Reports Server (NTRS)

    Stieger, H J

    1929-01-01

    In the foregoing remarks I have made an attempt to touch on some of the structural problems met with in cantilever wings, and dealt rather fully with a certain type of single-spar construction. The experimental test wing was a first attempt to demonstrate the principles of this departure from orthodox methods. The result was a wing both torsionally stiff and of light weight - lighter than a corresponding biplane construction.

  19. 258. Dennis Hill, Photographer April 1998 VIEW OF CANTILEVER TRUSS ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    258. Dennis Hill, Photographer April 1998 VIEW OF CANTILEVER TRUSS ANCHOR ARM AT PIERS E- AND E-2, SOUTH SIDE, FACING NORTH. - San Francisco Oakland Bay Bridge, Spanning San Francisco Bay, San Francisco, San Francisco County, CA

  20. Cantilever Beam Static and Dynamic Response Comparison with Mid-Point Bending for Thin MDF composite Panels

    Treesearch

    John F. Hunt; Houjiang Zhang; Zhiren Guo; Feng Fu

    2013-01-01

    A new cantilever beam apparatus has been developed to measure static and vibrational properties of small and thin samples of wood or composite panels. The apparatus applies a known displacement to a cantilever beam, measures its static load, then releases it into its natural first mode of transverse vibration. Free vibrational tip displacements as a function of time...

  1. Micro-/nanosized cantilever beams and mass sensors under applied axial tensile/compressive force vibrating in vacuum and viscous fluid

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Stachiv, Ivo, E-mail: stachiv@fzu.cz; Institute of Physics, Czech Academy of Sciences, Prague; Fang, Te-Hua

    2015-11-15

    Vibrating micro-/nanosized cantilever beams under an applied axial force are the key components of various devices used in nanotechnology. In this study, we perform a complete theoretical investigation of the cantilever beams under an arbitrary value of the axial force vibrating in a specific environment such as vacuum, air or viscous fluid. Based on the results easy accessible expressions enabling one the fast and highly accurate estimations of changes in the Q-factor and resonant frequencies of beam oscillating in viscous fluid caused by the applied axial force are derived and analyzed. It has been also shown that for beam-to-string andmore » string vibrational regimes the mode shape starts to significantly deviate from the one known for a beam without axial force. Moreover, a linear dependency of the vibrational amplitude in resonance on the dimensionless tension parameter has been found. We revealed that only a large axial force, i.e. the string vibrational regime, significantly improves the Q-factor of beams submerged in fluid, while an increase of the axial force in beam and beam-to-string transition regimes has a negligibly small impact on the Q-factor enhancement. Experiments carried out on the carbon nanotubes and nanowires are in a good agreement with present theoretical predictions.« less

  2. Coupled molecular and cantilever dynamics model for frequency-modulated atomic force microscopy.

    PubMed

    Klocke, Michael; Wolf, Dietrich E

    2016-01-01

    A molecular dynamics model is presented, which adds harmonic potentials to the atomic interactions to mimic the elastic properties of an AFM cantilever. It gives new insight into the correlation between the experimentally monitored frequency shift and cantilever damping due to the interaction between tip atoms and scanned surface. Applying the model to ionic crystals with rock salt structure two damping mechanisms are investigated, which occur separately or simultaneously depending on the tip position. These mechanisms are adhesion hysteresis on the one hand and lateral excitations of the cantilever on the other. We find that the short range Lennard-Jones part of the atomic interaction alone is sufficient for changing the predominant mechanism. When the long range ionic interaction is switched off, the two damping mechanisms occur with a completely different pattern, which is explained by the energy landscape for the apex atom of the tip. In this case the adhesion hysteresis is always associated with a distinct lateral displacement of the tip. It is shown how this may lead to a systematic shift between the periodic patterns obtained from the frequency and from the damping signal, respectively.

  3. DETAIL OF EAST (CANADIAN) CANTILEVER AND ANCHOR ARMS OF MAIN ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    DETAIL OF EAST (CANADIAN) CANTILEVER AND ANCHOR ARMS OF MAIN SPAN, SHOWING PIER C. VIEW TO NORTH. - Blue Water Bridge, Spanning St. Clair River at I-69, I-94, & Canadian Route 402, Port Huron, St. Clair County, MI

  4. 12. VIEW, LOOKING NORTHWEST, ALONG CENTERLINE FROM NORTH CANTILEVER TOWER ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    12. VIEW, LOOKING NORTHWEST, ALONG CENTERLINE FROM NORTH CANTILEVER TOWER TOWARD SOUTH PORTAL. As with previous photo, note vertical displacement in deck. - Smith River Bridge, CA State Highway 199 Spanning Smith River, Crescent City, Del Norte County, CA

  5. Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon. Degree awarded by Colorado Univ., Boulder, CO

    NASA Technical Reports Server (NTRS)

    Patterson, James D.

    1997-01-01

    The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

  6. A Quad-Cantilevered Plate micro-sensor for intracranial pressure measurement.

    PubMed

    Lalkov, Vasko; Qasaimeh, Mohammad A

    2017-07-01

    This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.

  7. Aeroelastic Flutter Behavior of Cantilever within a Nozzle-Diffuser Geometry

    NASA Astrophysics Data System (ADS)

    Tosi, Luis Phillipe; Colonius, Tim; Sherrit, Stewart; Lee, Hyeong Jae

    2015-11-01

    Aeroelastic flutter arises when the motion of a structure and its surrounding flowing fluid are coupled in a constructive manner, causing large amplitudes of vibration in the immersed solid. A cantilevered beam in axial flow within a nozzle-diffuser geometry exhibits interesting resonance behavior that presents good prospects for internal flow energy harvesting. Different modes can be excited as a function of throat velocity, nozzle geometry, fluid and cantilever material parameters. This work explores the relationship between the aeroelastic flutter instability boundaries and relevant non-dimensional parameters via experiments. Results suggest that for a linear expansion diffuser geometry, a non-dimensional stiffness, non-dimensional mass, and non-dimensional throat size are the critical parameters in mapping the instability. This map can serve as a guide to future work concerning possible electrical output and failure prediction in energy harvesters.

  8. Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same

    NASA Technical Reports Server (NTRS)

    Tang, Tony K. (Inventor); Kaiser, William J. (Inventor); Bartman, Randall K. (Inventor); Wilcox, Jaroslava Z. (Inventor); Gutierrez, Roman C. (Inventor); Calvet, Robert J. (Inventor)

    1999-01-01

    When embodied in a microgyroscope, the invention is comprised of a silicon, four-leaf clover structure with a post attached to the center. The whole structure is suspended by four silicon cantilevers or springs. The device is electrostatically actuated and capacitively detects Coriolis induced motions of the leaves of the leaf clover structure. In the case where the post is not symmetric with the plane of the clover leaves, the device can is usable as an accelerometer. If the post is provided in the shape of a dumb bell or an asymmetric post, the center of gravity is moved out of the plane of clover leaf structure and a hybrid device is provided. When the clover leaf structure is used without a center mass, it performs as a high Q resonator usable as a sensor of any physical phenomena which can be coupled to the resonant performance.

  9. Study of thermal and acoustic noise interferences in low stiffness atomic force microscope cantilevers and characterization of their dynamic properties.

    PubMed

    Boudaoud, Mokrane; Haddab, Yassine; Le Gorrec, Yann; Lutz, Philippe

    2012-01-01

    The atomic force microscope (AFM) is a powerful tool for the measurement of forces at the micro/nano scale when calibrated cantilevers are used. Besides many existing calibration techniques, the thermal calibration is one of the simplest and fastest methods for the dynamic characterization of an AFM cantilever. This method is efficient provided that the Brownian motion (thermal noise) is the most important source of excitation during the calibration process. Otherwise, the value of spring constant is underestimated. This paper investigates noise interference ranges in low stiffness AFM cantilevers taking into account thermal fluctuations and acoustic pressures as two main sources of noise. As a result, a preliminary knowledge about the conditions in which thermal fluctuations and acoustic pressures have closely the same effect on the AFM cantilever (noise interference) is provided with both theoretical and experimental arguments. Consequently, beyond the noise interference range, commercial low stiffness AFM cantilevers are calibrated in two ways: using the thermal noise (in a wide temperature range) and acoustic pressures generated by a loudspeaker. We then demonstrate that acoustic noises can also be used for an efficient characterization and calibration of low stiffness AFM cantilevers. The accuracy of the acoustic characterization is evaluated by comparison with results from the thermal calibration.

  10. High S/N ratio slotted step piezoresistive microcantilever designs for biosensors.

    PubMed

    Ansari, Mohd Zahid; Cho, Chongdu

    2013-03-26

    This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts.

  11. High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors

    PubMed Central

    Ansari, Mohd Zahid; Cho, Chongdu

    2013-01-01

    This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts. PMID:23535637

  12. Use of thermal cycling to reduce adhesion of OTS coated coated MEMS cantilevers

    NASA Astrophysics Data System (ADS)

    Ali, Shaikh M.; Phinney, Leslie M.

    2003-01-01

    °Microelectromechanical systems (MEMS) have enormous potential to contribute in diverse fields such as automotive, health care, aerospace, consumer products, and biotechnology, but successful commercial applications of MEMS are still small in number. Reliability of MEMS is a major impediment to the commercialization of laboratory prototypes. Due to the multitude of MEMS applications and the numerous processing and packaging steps, MEMS are exposed to a variety of environmental conditions, making the prediction of operational reliability difficult. In this paper, we investigate the effects of operating temperature on the in-use adhesive failure of electrostatically actuated MEMS microcantilevers coated with octadecyltrichlorosilane (OTS) films. The cantilevers are subjected to repeated temperature cycles and electrostatically actuated at temperatures between 25°C and 300°C in ambient air. The experimental results indicate that temperature cycling of the OTS coated cantilevers in air reduces the sticking probability of the microcantilevers. The sticking probability of OTS coated cantilevers was highest during heating, which decreased during cooling, and was lowest during reheating. Modifications to the OTS release method to increase its yield are also discussed.

  13. Force Spectroscopy with 9-μs Resolution and Sub-pN Stability by Tailoring AFM Cantilever Geometry.

    PubMed

    Edwards, Devin T; Faulk, Jaevyn K; LeBlanc, Marc-André; Perkins, Thomas T

    2017-12-19

    Atomic force microscopy (AFM)-based single-molecule force spectroscopy (SMFS) is a powerful yet accessible means to characterize the unfolding/refolding dynamics of individual molecules and resolve closely spaced, transiently occupied folding intermediates. On a modern commercial AFM, these applications and others are now limited by the mechanical properties of the cantilever. Specifically, AFM-based SMFS data quality is degraded by a commercial cantilever's limited combination of temporal resolution, force precision, and force stability. Recently, we modified commercial cantilevers with a focused ion beam to optimize their properties for SMFS. Here, we extend this capability by modifying a 40 × 18 μm 2 cantilever into one terminated with a gold-coated, 4 × 4 μm 2 reflective region connected to an uncoated 2-μm-wide central shaft. This "Warhammer" geometry achieved 8.5-μs resolution coupled with improved force precision and sub-pN stability over 100 s when measured on a commercial AFM. We highlighted this cantilever's biological utility by first resolving a calmodulin unfolding intermediate previously undetected by AFM and then measuring the stabilization of calmodulin by myosin light chain kinase at dramatically higher unfolding velocities than in previous AFM studies. More generally, enhancing data quality via an improved combination of time resolution, force precision, and force stability will broadly benefit biological applications of AFM. Published by Elsevier Inc.

  14. A comparative finite elemental analysis of glass abutment supported and unsupported cantilever fixed partial denture.

    PubMed

    Ramakrishaniah, Ravikumar; Al Kheraif, Abdulaziz A; Elsharawy, Mohamed A; Alsaleh, Ayman K; Ismail Mohamed, Karem M; Rehman, Ihtesham Ur

    2015-05-01

    The purpose of this study was to investigate and compare the load distribution and displacement of cantilever prostheses with and without glass abutment by three dimensional finite element analysis. Micro-computed tomography was used to study the relationship between the glass abutment and the ridge. The external surface of the maxilla was scanned, and a simplified finite element model was constructed. The ZX-27 glass abutment and the maxillary first and second premolars were created and modified. The solid model of the three-unit cantilever fixed partial denture was scanned, and the fitting surface was modified with reference to the created abutments using the 3D CAD system. The finite element analysis was completed in ANSYS. The fit and total gap volume between the glass abutment and dental model were determined by Skyscan 1173 high-energy spiral micro-CT scan. The results of the finite element analysis in this study showed that the cantilever prosthesis supported by the glass abutment demonstrated significantly less stress on the terminal abutment and overall deformation of the prosthesis under vertical and oblique load. Micro-computed tomography determined a gap volume of 6.74162 mm(3). By contacting the mucosa, glass abutments transfer some amount of masticatory load to the residual alveolar ridge, thereby preventing damage to the periodontal microstructures of the terminal abutment. The passive contact of the glass abutment with the mucosa not only preserves the health of the mucosa covering the ridge but also permits easy cleaning. It is possible to increase the success rate of cantilever FPDs by supporting the cantilevered pontic with glass abutments. Copyright © 2015 Academy of Dental Materials. Published by Elsevier Ltd. All rights reserved.

  15. Microfluidic cantilever detects bacteria and measures their susceptibility to antibiotics in small confined volumes

    NASA Astrophysics Data System (ADS)

    Etayash, Hashem; Khan, M. F.; Kaur, Kamaljit; Thundat, Thomas

    2016-10-01

    In the fight against drug-resistant bacteria, accurate and high-throughput detection is essential. Here, a bimaterial microcantilever with an embedded microfluidic channel with internal surfaces chemically or physically functionalized with receptors selectively captures the bacteria passing through the channel. Bacterial adsorption inside the cantilever results in changes in the resonance frequency (mass) and cantilever deflection (adsorption stress). The excitation of trapped bacteria using infrared radiation (IR) causes the cantilever to deflect in proportion to the infrared absorption of the bacteria, providing a nanomechanical infrared spectrum for selective identification. We demonstrate the in situ detection and discrimination of Listeria monocytogenes at a concentration of single cell per μl. Trapped Escherichia coli in the microchannel shows a distinct nanomechanical response when exposed to antibiotics. This approach, which combines enrichment with three different modes of detection, can serve as a platform for the development of a portable, high-throughput device for use in the real-time detection of bacteria and their response to antibiotics.

  16. Development of lead zirconate titanate cantilevers on the micrometer length scale

    NASA Astrophysics Data System (ADS)

    Martin, Christopher Robert

    The objective of this research project was to fabricate a functional ferroelectric microcantilever from patterned lead zirconate titanate (PZT) thin films. Cantilevers fabricated from ferroelectric materials have tremendous potential in sensing applications, particularly due to the increased sensitivity that miniaturized devices offer. This thesis highlights and explores a number of the processing issues that hindered the production of a working prototype. PZT is patterned using soft lithography-inspired techniques from a PZT chemical precursor solution derived by the chelation synthesis route. As the ability to pattern ceramic materials derived from sol-gels on the micrometer scale is a relatively new technology, this thesis aims to expand the scientific understanding of new issues that arise when working with these patterned films. For example, the use of Micromolding in Capillaries (MIMIC) to pattern the PZT thin films results in the evolution of topographical distortions from the shape of the original mold during the shrinkage of patterned thin film during drying and sintering. The factors that contribute to this effect have been explained and a new processing technique called MicroChannel Molding (muCM) was developed. This new process combines the advantages of soft lithography with traditional silicon microfabrication techniques to ensure compatibility with current industrial practices. This work lays the foundation for the future production of working ferroelectric microcantilevers. The proposed microfabrication process is described along with descriptions of each processing difficulty that was encountered. Modifications to the process are proposed along with the descriptions of alternative processing techniques that were attempted for the benefit of future researchers. This dissertation concludes with the electronic characterization of micropattemed PZT thin films. To our knowledge, the ferroelectric properties of patterned PZT thin films have never been

  17. An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

    NASA Technical Reports Server (NTRS)

    Yazdi, N.; Najafi, K.

    2000-01-01

    This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is fabricated on a single-silicon wafer using a combined surface and bulk fabrication process. The microaccelerometer has high device sensitivity, low noise, and low/controllable damping that are the key factors for attaining micro g and sub-micro g resolution in capacitive accelerometers. The microfabrication process produces a large proof mass by using the whole wafer thickness and a large sense capacitance by utilizing a thin sacrificial layer. The sense/feedback electrodes are formed by a deposited 2-3 microns polysilicon film with embedded 25-35 microns-thick vertical stiffeners. These electrodes, while thin, are made very stiff by the thick embedded stiffeners so that force rebalancing of the proof mass becomes possible. The polysilicon electrodes are patterned to create damping holes. The microaccelerometers are batch-fabricated, packaged, and tested successfully. A device with a 2-mm x 1-mm proof mass and a full bridge support has a measured sensitivity of 2 pF/g. The measured sensitivity of a 4-mm x 1-mm accelerometer with a cantilever support is 19.4 pF/g. The calculated noise floor of these devices at atmosphere are 0.23 micro g/sqrt(Hz) and 0.16 micro g/sqrt(Hz), respectively.

  18. A Novel Approach to the Sensing of Liquid Density Using a Plastic Optical Fibre Cantilever Beam

    ERIC Educational Resources Information Center

    Kulkarni, Atul; Kim, Youngjin; Kim, Taesung

    2009-01-01

    This article reports for the first time the use of a plastic optical fibre (POF) cantilever beam to measure the density of a liquid. The sensor is based on the Archimedes buoyancy principle. The sensor consists of a POF bonded on the surface of a metal beam in the form of a cantilever configuration, and at the free end of the beam a displacer is…

  19. Impact of Isolation and Immobilization Layers on the Electro-Mechanical Response of Piezoresistive Nano Cantilever Sensors.

    PubMed

    Mathew, Ribu; Sankar, A Ravi

    2018-03-01

    In the last decade, piezoresistive nano cantilever sensors have been extensively explored, especially for chemical and biological sensing applications. Piezoresistive cantilever sensors are multi-layer structures with different constituent materials. Performance of such sensors is a function of their geometry and constituent materials. For a fixed material set, the pre-requisite for optimizing the performance of a composite piezoresistive cantilever sensor is careful geometrical design of its constituent layers. Even though, treatise encompasses various designs of such sensors, typically for computational simplicity the functional layers i.e., the isolation and immobilization layers are neglected in the modeling stages. In this paper, we elucidate the impact of the functional layers on the electro-mechanical response of composite piezoresistive nano cantilever sensors. Systematic and detailed computations are performed using theoretical models and numerical simulations. Results show that both the isolation and immobilization layers play a critical role in governing the sensor performance. Simulation results depict that compared to a sensor with an isolation layer of thickness 100 nm, a sensor without isolation layer has 36.29% and 42.51% better deflection sensitivity and electrical sensitivity respectively. Furthermore, it is found that when an immobilization layer of thickness 40 nm is added atop the isolation layer, the deflection sensitivity and electrical sensitivity reduces by 12.98% and 15.83% respectively. Through our investigation it is shown that the isolation and immobilization layers not only play a vital role in determining the stability and electro-mechanical response of the sensor but their negligence in the design stages can be detrimental. Apart from investigating the impact of the immobilization layer thickness, to model the sensor closer to real time operational conditions, we have performed analysis to understand the impact of non-uniformity in

  20. 25. DETAIL OF SOUTH CANTILEVER ANCHOR ARM CONNECTION L1 AND ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    25. DETAIL OF SOUTH CANTILEVER ANCHOR ARM CONNECTION L-1 AND LINK EXPANSION BEARING, LOOKING SOUTHEAST - Jackson's Ferry Bridge, Route 52 over New River, 6.3 miles south of Route 94, Austinville, Wythe County, VA

  1. Strategy Guideline: Quality Management in Existing Homes - Cantilever Floor Example

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Taggart, J.; Sikora, J.; Wiehagen, J.

    2011-12-01

    This guideline is designed to highlight the QA process that can be applied to any residential building retrofit activity. The cantilevered floor retrofit detailed in this guideline is included only to provide an actual retrofit example to better illustrate the QA activities being presented.

  2. 13. DETAIL OF SOUTH PIER TOP (WEST SIDE) AND CANTILEVERED ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    13. DETAIL OF SOUTH PIER TOP (WEST SIDE) AND CANTILEVERED SIDEWALK. LOOKING NORTH. - Route 31 Bridge, New Jersey Route 31, crossing disused main line of Central Railroad of New Jersey (C.R.R.N.J.) (New Jersey Transit's Raritan Valley Line), Hampton, Hunterdon County, NJ

  3. Gamma non-ionizing energy loss: Comparison with the damage factor in silicon devices

    NASA Astrophysics Data System (ADS)

    El Allam, E.; Inguimbert, C.; Meulenberg, A.; Jorio, A.; Zorkani, I.

    2018-03-01

    The concept of non-ionizing energy loss (NIEL) has been demonstrated to be a successful approach to describe the displacement damage effects in silicon materials and devices. However, some discrepancies exist in the literature between experimental damage factors and theoretical NIELs. 60Co gamma rays having a low NIEL are an interesting particle source that can be used to validate the NIEL scaling approach. This paper presents different 60Co gamma ray NIEL values for silicon targets. They are compared with the radiation-induced increase in the thermal generation rate of carriers per unit fluence. The differences between the different models, including one using molecular dynamics, are discussed.

  4. A macroscopic non-destructive testing system based on the cantilever-sample contact resonance

    NASA Astrophysics Data System (ADS)

    Fu, Ji; Lin, Lizhi; Zhou, Xilong; Li, Yingwei; Li, Faxin

    2012-12-01

    Detecting the inside or buried defects in materials and structures is always a challenge in the field of nondestructive testing (NDT). In this paper, enlightened by the operation principle of the contact resonance force microscopy or atomic force acoustic microscopy (AFAM), we proposed a macroscopic NDT system based on contact resonance of the cantilever-sample surface to detect the local stiffness variations in materials or structures. We fabricated a piezoelectric unimorph with the dimension typically of 150 mm × 8 mm × 2 mm to act as a macroscopic cantilever, whose flexural mode vibration was driven by a wideband power amplifier together with a signal generator. The vibration signal of the macroscopic cantilever is detected by a high sensitive strain gauge bonded on the cantilever surface which is much more stable than the laser diode sensor in AFAM, thus making it very suitable for outdoor operations. Scanning is realized by a three-dimensional motorized stage with the Z axis for pressing force setting. The whole system is controlled by a LabVIEW-based homemade software. Like the AFAM, this NDT system can also work in two modes, i.e., the single-frequency mode and the resonance-tracking mode. In the latter mode, the contact stiffness at each pixel of the sample can be obtained by using the measured contact resonance frequency and a beam dynamics model. Testing results of this NDT system on a grid structure with an opaque panel show that in both modes the prefabricated defect beneath the panel can be detected and the grid structures can be clearly "seen," which indicates the validity of this NDT system. The sensitivity of this NDT system was also examined.

  5. Determination of Young's modulus of epoxy coated polyethylene micro-cantilever using phase-shift shadow moiré method

    NASA Astrophysics Data System (ADS)

    Lim, J. H.; Ratnam, M. M.; Azid, I. A.; Mutharasu, D.

    2011-11-01

    Young's moduli of various epoxy coated polyethylene terephthalate (PET) micro-cantilevers were determined from the deflection results obtained using the phase-shift shadow moiré (PSSM) method. The filler materials for epoxy coatings were aluminum and graphite powders that were mixed with epoxy at various percentages. Young's moduli were calculated from theory based on the deflection results. The PET micro-cantilever coated with aluminum-epoxy coating showed increasing value of Young's modulus when the ratios of the aluminum-epoxy were increased. The graphite-epoxy coating on the PET micro-cantilever also showed the same trend. The experimental results also show that Young's modulus of the graphite-epoxy coating is higher than aluminum-epoxy coating in comparison at the same mixing ratio.

  6. On the coupling of nonlinear macro-fiber composite piezoelectric cantilever dynamics with hydrodynamic loads

    NASA Astrophysics Data System (ADS)

    Tan, D.; Erturk, A.

    2018-03-01

    For bio-inspired, fish-like robotic propulsion, the Macro-Fiber Composite (MFC) piezoelectric technology offers noiseless actuation with a balance between actuation force and velocity response. However, internal nonlinear- ities within the MFCs, such as piezoelectric softening, geometric hardening, inertial softening, and nonlinear dissipation, couple with the hydrodynamic loading on the structure from the surrounding fluid. In the present work, we explore nonlinear actuation of MFC cantilevers underwater and develop a mathematical framework for modeling and analysis. In vacuo resonant actuation experiments are conducted for a set of MFC cantilevers of varying length to width aspect ratios to validate the structural model in the absence of fluid loading. These MFC cantilevers are then subjected to underwater resonant actuation experiments, and model simulations are compared with nonlinear experimental frequency response functions. It is observed that semi-empirical hydro- dynamic loads obtained from quasilinear experiments have to be modified to account for amplitude dependent added mass, and additional nonlinear hydrodynamic effects might be present, yielding qualitative differences in the resulting underwater frequency respones curves with increased excitation amplitude.

  7. SEM in situ MiniCantilever Beam Bending of U-10Mo/Zr/Al Fuel Elements

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mook, William; Baldwin, Jon K.; Martinez, Ricardo M.

    2014-06-16

    In this work, the fracture behavior of Al/Zr and Zr/dU-10Mo interfaces was measured via the minicantilever bend technique. The energy dissipation rates were found to be approximately 3.7-5 mj/mm 2 and 5.9 mj/mm 2 for each interface, respectively. It was found that in order to test the Zr/U-10Mo interface, location of the hinge of the cantilever was a key parameter. While this test could be adapted to hot cell use through careful alignment fixturing and measurement of crack lengths with an optical microscope (as opposed to SEM, which was used here out of convenience), machining of the cantilevers via MiniMillmore » in such a way as to locate the interfaces at the cantilever hinge, as well as proper placement of a femtosecond laser notch will continue to be key challenges in a hot cell environment.« less

  8. Sharp-Tip Silver Nanowires Mounted on Cantilevers for High-Aspect-Ratio High-Resolution Imaging.

    PubMed

    Ma, Xuezhi; Zhu, Yangzhi; Kim, Sanggon; Liu, Qiushi; Byrley, Peter; Wei, Yang; Zhang, Jin; Jiang, Kaili; Fan, Shoushan; Yan, Ruoxue; Liu, Ming

    2016-11-09

    Despite many efforts to fabricate high-aspect-ratio atomic force microscopy (HAR-AFM) probes for high-fidelity, high-resolution topographical imaging of three-dimensional (3D) nanostructured surfaces, current HAR probes still suffer from unsatisfactory performance, low wear-resistivity, and extravagant prices. The primary objective of this work is to demonstrate a novel design of a high-resolution (HR) HAR AFM probe, which is fabricated through a reliable, cost-efficient benchtop process to precisely implant a single ultrasharp metallic nanowire on a standard AFM cantilever probe. The force-displacement curve indicated that the HAR-HR probe is robust against buckling and bending up to 150 nN. The probes were tested on polymer trenches, showing a much better image fidelity when compared with standard silicon tips. The lateral resolution, when scanning a rough metal thin film and single-walled carbon nanotubes (SW-CNTs), was found to be better than 8 nm. Finally, stable imaging quality in tapping mode was demonstrated for at least 15 continuous scans indicating high resistance to wear. These results demonstrate a reliable benchtop fabrication technique toward metallic HAR-HR AFM probes with performance parallel or exceeding that of commercial HAR probes, yet at a fraction of their cost.

  9. 31. DETAIL OF SOUTH CANTILEVER ARM CONNECTION L13, SHOWING SUSPENSION ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    31. DETAIL OF SOUTH CANTILEVER ARM CONNECTION L-13, SHOWING SUSPENSION MEMBER AND PIN CONNECTION TO THE SUSPENDED TRUSS SPAN, LOOKING NORTHWEST - Jackson's Ferry Bridge, Route 52 over New River, 6.3 miles south of Route 94, Austinville, Wythe County, VA

  10. Controlling the shapes of coated silicon substrates via magnetic fields, a progress report

    NASA Astrophysics Data System (ADS)

    Ulmer, Melville P.; Coppejans, Rocco; Buchholz, David B.; Cao, Jian; Wang, Xiaoli; Mercado, Alejandro M.; Qian, Jun; Assoufid, Lahsen; O'Donnell, Allison E.; Condron, Kyle S.; Harpt, Benjamin E.

    2017-08-01

    We describe our progress in developing a method for correcting residual figure errors in X-ray mirrors. The technology has applications to both synchrotron radiation beamlines and X-ray astronomy. Our concept is to develop mirrors that are on the order of a millimeter thick. A magnetic smart material (MSM) is deposited onto the mirror substrate (silicon) and coated with a magnetically hard material. The shape of the mirror can be controlled by applying an external magnetic field to the mirror. This causes the MSM to expand or contract, thereby applying a magnetostrictive stress to the mirror and changing its shape. The shape change is maintained after the field has been removed by the magnetic hard material, which retains part of the field and prevents the MSM from relaxing. Here we present the results of shaping 200 µm thick silicon (100) 14 × 2 mm cantilevers and 50 × 50 × 0.1 mm substrates. We demonstrate that not only can a sizable deflection be created, but it can also be retained for ˜ 60 hours.

  11. Attachment of micro- and nano-particles on tipless cantilevers for colloidal probe microscopy.

    PubMed

    D'Sa, Dexter J; Chan, Hak-Kim; Chrzanowski, Wojciech

    2014-07-15

    Current colloidal probe preparation techniques face several challenges in the production of functional probes using particles ⩽5 μm. Challenges include: glue encapsulated particles, glue altered particle properties, improper particle or agglomerate attachment, and lengthy procedures. We present a method to rapidly and reproducibly produce functional micro and nano-colloidal probes. Using a six-step procedure, cantilevers mounted on a custom designed 45° holder were used to approach and obtain a minimal amount of epoxy resin (viscosity of ∼14,000 cP) followed by a single micron/nano particle on the apex of a tipless cantilever. The epoxy and particles were prepared on individual glass slides and subsequently affixed to a 10× or 40× optical microscope lens using another custom designed holder. Scanning electron microscopy and comparative glue-colloidal probe measurements were used to confirm colloidal probe functionality. The method presented allowed rapid and reproducible production of functional colloidal probes (80% success). Single nano-particles were prominently affixed to the apex of the cantilever, unaffected by the epoxy. Nano-colloidal probes were used to conduct topographical, instantaneous force, and adhesive force mapping measurements in dry and liquid media conveying their versatility and functionality in studying nano-colloidal systems. Copyright © 2014 Elsevier Inc. All rights reserved.

  12. A paper-based cantilever array sensor: Monitoring volatile organic compounds with naked eye.

    PubMed

    Fraiwan, Arwa; Lee, Hankeun; Choi, Seokheun

    2016-09-01

    Volatile organic compound (VOC) detection is critical for controlling industrial and commercial emissions, environmental monitoring, and public health. Simple, portable, rapid and low-cost VOC sensing platforms offer the benefits of on-site and real-time monitoring anytime and anywhere. The best and most practically useful approaches to monitoring would include equipment-free and power-free detection by the naked eye. In this work, we created a novel, paper-based cantilever sensor array that allows simple and rapid naked-eye VOC detection without the need for power, electronics or readout interface/equipment. This simple VOC detection method was achieved using (i) low-cost paper materials as a substrate and (ii) swellable thin polymers adhered to the paper. Upon exposure to VOCs, the polymer swelling adhered to the paper-based cantilever, inducing mechanical deflection that generated a distinctive composite pattern of the deflection angles for a specific VOC. The angle is directly measured by the naked eye on a 3-D protractor printed on a paper facing the cantilevers. The generated angle patterns are subjected to statistical algorithms (linear discriminant analysis (LDA)) to classify each VOC sample and selectively detect a VOC. We classified four VOC samples with 100% accuracy using LDA. Copyright © 2016 Elsevier B.V. All rights reserved.

  13. Analysis of capacitive force acting on a cantilever tip at solid/liquid interfaces

    NASA Astrophysics Data System (ADS)

    Umeda, Ken-ichi; Kobayashi, Kei; Oyabu, Noriaki; Hirata, Yoshiki; Matsushige, Kazumi; Yamada, Hirofumi

    2013-04-01

    Dielectric properties of biomolecules or biomembranes are directly related to their structures and biological activities. Capacitance force microscopy based on the cantilever deflection detection is a useful scanning probe technique that can map local dielectric constant. Here we report measurements and analysis of the capacitive force acting on a cantilever tip at solid/liquid interfaces induced by application of an alternating voltage to explore the feasibility of the measurements of local dielectric constant by the voltage modulation technique in aqueous solutions. The results presented here suggest that the local dielectric constant measurements by the conventional voltage modulation technique are basically possible even in polar liquid media. However, the cantilever deflection is not only induced by the electrostatic force, but also by the surface stress, which does not include the local dielectric information. Moreover, since the voltage applied between the tip and sample are divided by the electric double layer and the bulk polar liquid, the capacitive force acting on the apex of the tip are strongly attenuated. For these reasons, the lateral resolution in the local dielectric constant measurements is expected to be deteriorated in polar liquid media depending on the magnitude of dielectric response. Finally, we present the criteria for local dielectric constant measurements with a high lateral resolution in polar liquid media.

  14. 75 FR 20982 - University of Michigan, et al., Notice of Consolidated Decision on Applications for Duty-Free...

    Federal Register 2010, 2011, 2012, 2013, 2014

    2010-04-22

    ... conventional AFM type silicon cantilevers as well as cantilevered optical fiber probes with exposed probed... probe and the ability to image in both NSOM and AFM with AC operating modes. We know of no instrument...

  15. Experimental and numerical study on transverse piezoelectricity of xBiInO3-(1 - x)PbTiO3 films by multilayer cantilevers

    NASA Astrophysics Data System (ADS)

    Sun, Ke-xue; Zhang, Shu-yi; Shui, Xiu-ji; Wasa, Kiyotaka

    2018-02-01

    The effective transverse piezoelectric coefficient of the piezoelectric films xBiInO3-(1 - x)PbTiO3 (x = 0,0.10,0.15,0.20) were studied experimentally and numerically by multilayer cantilevers. The xBiInO3-(1 - x)PbTiO3 thin films were deposited on (101)SrRuO3/(100)Pt/(100)MgO substrates and then covered with Pt electrode by RF-magnetron sputtering method. In experiments, the tip vibration amplitudes of the cantilevers for different x of the films were measured, in which the optimized compositions for maximizing the tip vibration can be found. Meanwhile, based on the bending model of multilayer piezoelectric cantilevers, the tip-deflection and transverse piezoelectricity of the cantilevers were simulated by COMSOL software. By comparing the experimental and numerical results, both are in agreement very well, and the mechanism of the optimized transverse piezoelectricity of the cantilevers was proposed finally.

  16. A Comparative Analysis on Two Types of Oral Implants, Bone-Level and Tissue-Level, with Different Cantilever Lengths of Fixed Prosthesis.

    PubMed

    Mosavar, Alireza; Nili, Monireh; Hashemi, Sayed Raouf; Kadkhodaei, Mahmoud

    2017-06-01

    Depending on esthetic, anatomical, and functional aspects, in implant-prosthetic restoration of a completely edentulous jaw, the selection of implant type is highly important; however, bone- and tissue-level implants and their stress distribution in bone have not yet been comparatively investigated. Hence, finite element analysis was used to study the influence of cantilever length in a fixed prosthesis on stress distribution in peri-implant bone around these two types of oral implants. A 3D edentulous mandible was modeled. In simulations, a framework with four posterior cantilever lengths and two types of implants, bone-level and tissue-level, was considered. A compressive load was applied to the distal regions of the cantilevers, and the von-Mises stress of peri-implant bone was investigated. The independent t-test and the Pearson correlation coefficient analyzed the results (α = 0.05). Stresses in the cortical bone around the bone-level implants were greater than those in the tissue-level implants with the same cantilever length. In addition, by extending the cantilever length, the stress values in peri-implant bone increased. Therefore, when the cantilever was at its maximum length, the maximum stress was in cortical bone and around the bone-level distal implants. The results of the present study indicate that treatment with tissue-level implants is potentially more advantageous than with bone-level implants for implant-supported fixed prostheses. © 2015 by the American College of Prosthodontists.

  17. A Silicon Disk with Sandwiched Piezoelectric Springs for Ultra-low Frequency Energy Harvesting

    NASA Astrophysics Data System (ADS)

    Lu, J.; Zhang, L.; Yamashita, T.; Takei, R.; Makimoto, N.; Kobayashi, T.

    2015-12-01

    Exploiting the sporadic availability of energy by energy harvesting devices is an attractive solution to power wireless sensor nodes and many other distributed modules for much longer operation duration and much lower maintenance cost after they are deployed. MEMS energy harvesting devices exhibit unique advantageous of super-compact size, mass productivity, and easy-integration with sensors, actuators and other integrated circuits. However, MEMS vibration energy harvesting devices are rather difficult to be used practically due to their poor response to most of the ambient vibrations at ultra-low frequency range. In this paper, a micromachined silicon disk with sandwiched piezoelectric springs was successfully developed with resonant frequency of 15.36∼42.42 Hz and quality factor of 39∼55 for energy harvesting. Footprint size of the device was 6 mm × 6 mm, which is less than half of the piezoelectric cantilevers, while the device can scavenge reasonably high power of 0.57 μW at the acceleration of 0.1 g. The evaluation results also suggested that the device was quite sensitive as a sensor for selective monitoring of vibrations at a certain frequency.

  18. Metacarpal geometry changes during Thoroughbred race training are compatible with sagittal-plane cantilever bending.

    PubMed

    Merritt, J S; Davies, H M S

    2010-11-01

    Bending of the equine metacarpal bones during locomotion is poorly understood. Cantilever bending, in particular, may influence the loading of the metacarpal bones and surrounding structures in unique ways. We hypothesised that increased amounts of sagittal-plane cantilever bending may govern changes to the shape of the metacarpal bones of Thoroughbred racehorses during training. We hypothesised that this type of bending would require a linear change to occur in the combined second moment of area of the bones for sagittal-plane bending (I) during race training. Six Thoroughbred racehorses were used, who had all completed at least 4 years of race training at a commercial stable. The approximate change in I that had occurred during race training was computed from radiographic measurements at the start and end of training using a simple model of bone shape. A significant (P < 0.001), approximately linear pattern of change in I was observed in each horse, with the maximum change occurring proximally and the minimum change occurring distally. The pattern of change in I was compatible with the hypothesis that sagittal-plane cantilever bending governed changes to the shape of the metacarpal bones during race training. © 2010 EVJ Ltd.

  19. Development of graphene nanoplatelet embedded polymer microcantilever for vapour phase explosive detection applications

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Ray, Prasenjit; Pandey, Swapnil; Ramgopal Rao, V.

    2014-09-28

    In this work, a graphene based strain sensor has been reported for explosive vapour detection applications by exploiting the piezoresistive property of graphene. Instead of silicon based cantilevers, a low cost polymeric micro-cantilever platform has been used to fabricate this strain sensor by embedding the graphene nanoplatelet layer inside the beam. The fabricated devices were characterized for their mechanical and electromechanical behaviour. This device shows a very high gauge factor which is around ~144. Also the resonant frequency of these cantilevers is high enough such that the measurements are not affected by environmental noise. These devices have been used inmore » this work for reliable detection of explosive vapours such as 2,4,6-Trinitrotoluene down to parts-per-billion concentrations in ambient conditions.« less

  20. Vibrational shape tracking of atomic force microscopy cantilevers for improved sensitivity and accuracy of nanomechanical measurements

    NASA Astrophysics Data System (ADS)

    Wagner, Ryan; Killgore, Jason P.; Tung, Ryan C.; Raman, Arvind; Hurley, Donna C.

    2015-01-01

    Contact resonance atomic force microscopy (CR-AFM) methods currently utilize the eigenvalues, or resonant frequencies, of an AFM cantilever in contact with a surface to quantify local mechanical properties. However, the cantilever eigenmodes, or vibrational shapes, also depend strongly on tip-sample contact stiffness. In this paper, we evaluate the potential of eigenmode measurements for improved accuracy and sensitivity of CR-AFM. We apply a recently developed, in situ laser scanning method to experimentally measure changes in cantilever eigenmodes as a function of tip-sample stiffness. Regions of maximum sensitivity for eigenvalues and eigenmodes are compared and found to occur at different values of contact stiffness. The results allow the development of practical guidelines for CR-AFM experiments, such as optimum laser spot positioning for different experimental conditions. These experiments provide insight into the complex system dynamics that can affect CR-AFM and lay a foundation for enhanced nanomechanical measurements with CR-AFM.

  1. Instability of a cantilevered flexible plate in viscous channel flow

    NASA Astrophysics Data System (ADS)

    Balint, T. S.; Lucey, A. D.

    2005-10-01

    The stability of a flexible cantilevered plate in viscous channel flow is studied as a representation of the dynamics of the human upper airway. The focus is on instability mechanisms of the soft palate (flexible plate) that cause airway blockage during sleep. We solve the Navier Stokes equations for flow with Reynolds numbers up to 1500 fully coupled with the dynamics of the plate motion solved using finite-differences. The study is 2-D and based upon linearized plate mechanics. When both upper and lower airways are open, the plate is found to lose its stability through a flutter mechanism and a critical Reynolds number exists. When one airway is closed, the plate principally loses its stability through a divergence mechanism and a critical flow speed exists. However, below the divergence-onset flow speed, flutter can exist for low levels of structural damping in the flexible plate. Our results serve to extend understanding of flow-induced instability of cantilevered flexible plates and will ultimately improve the diagnosis and treatment of upper-airway disorders.

  2. Fluid-structure interactions of photo-responsive polymer cantilevers

    NASA Astrophysics Data System (ADS)

    Bin, Jonghoon; Oates, William S.; Yousuff Hussaini, M.

    2013-02-01

    A new class of photomechanical liquid crystal networks (LCNs) has emerged, which generate large bending deformation and fast response times that scale with the resonance of the polymer films. Here, a numerical study is presented that describes the photomechanical structural dynamic behavior of an LCN in a fluid medium; however, the methodology is also applicable to fluid-structure interactions of a broader range of adaptive structures. Here, we simulate the oscillation of photomechanical cantilevers excited by light while simultaneously modeling the effect of the surrounding fluid at different ambient pressures. The photoactuated LCN is modeled as an elastic thin cantilever plate, and gradients in photostrain from the external light are computed from the assumptions of light absorption and photoisomerization through the film thickness. Numerical approximations of the equations governing the plate are based on cubic B-spline shape functions and a second order implicit Newmark central scheme for time integration. For the fluid, three dimensional unsteady incompressible Navier-Stokes equations are solved using the arbitrary Lagrangian-Eulerian (ALE) method, which employs a structured body-fitted curvilinear coordinate system where the solid-fluid interface is a mesh line of the system, and the complicated interface boundary conditions are accommodated in a conventional finite-volume formulation. Numerical examples are given which provide new insight into material behavior in a fluid medium as a function of ambient pressure.

  3. Nonlinear behaviour of cantilevered carbon nanotube resonators based on a new nonlinear electrostatic load model

    NASA Astrophysics Data System (ADS)

    Farokhi, Hamed; Païdoussis, Michael P.; Misra, Arun K.

    2018-04-01

    The present study examines the nonlinear behaviour of a cantilevered carbon nanotube (CNT) resonator and its mass detection sensitivity, employing a new nonlinear electrostatic load model. More specifically, a 3D finite element model is developed in order to obtain the electrostatic load distribution on cantilevered CNT resonators. A new nonlinear electrostatic load model is then proposed accounting for the end effects due to finite length. Additionally, a new nonlinear size-dependent continuum model is developed for the cantilevered CNT resonator, employing the modified couple stress theory (to account for size-effects) together with the Kelvin-Voigt model (to account for nonlinear damping); the size-dependent model takes into account all sources of nonlinearity, i.e. geometrical and inertial nonlinearities as well as nonlinearities associated with damping, small-scale, and electrostatic load. The nonlinear equation of motion of the cantilevered CNT resonator is obtained based on the new models developed for the CNT resonator and the electrostatic load. The Galerkin method is then applied to the nonlinear equation of motion, resulting in a set of nonlinear ordinary differential equations, consisting of geometrical, inertial, electrical, damping, and size-dependent nonlinear terms. This high-dimensional nonlinear discretized model is solved numerically utilizing the pseudo-arclength continuation technique. The nonlinear static and dynamic responses of the system are examined for various cases, investigating the effect of DC and AC voltages, length-scale parameter, nonlinear damping, and electrostatic load. Moreover, the mass detection sensitivity of the system is examined for possible application of the CNT resonator as a nanosensor.

  4. Catalyst-induced growth of carbon nanotubes on tips of cantilevers and nanowires

    DOEpatents

    Lee, James Weifu; Lowndes, Douglas H.; Merkulov, Vladimir I.; Eres, Gyula; Wei, Yayi; Greenbaum, Elias; Lee, Ida

    2004-06-29

    A method is described for catalyst-induced growth of carbon nanotubes, nanofibers, and other nanostructures on the tips of nanowires, cantilevers, conductive micro/nanometer structures, wafers and the like. The method can be used for production of carbon nanotube-anchored cantilevers that can significantly improve the performance of scaning probe microscopy (AFM, EFM etc). The invention can also be used in many other processes of micro and/or nanofabrication with carbon nanotubes/fibers. Key elements of this invention include: (1) Proper selection of a metal catalyst and programmable pulsed electrolytic deposition of the desired specific catalyst precisely at the tip of a substrate, (2) Catalyst-induced growth of carbon nanotubes/fibers at the catalyst-deposited tips, (3) Control of carbon nanotube/fiber growth pattern by manipulation of tip shape and growth conditions, and (4) Automation for mass production.

  5. Process Research On Polycrystalline Silicon Material (PROPSM)

    NASA Technical Reports Server (NTRS)

    Culik, J. S.; Wohlgemuth, J. H.

    1982-01-01

    Performance limiting mechanisms in polycrystalline silicon are investigated by fabricating a matrix of solar cells of various thicknesses from polycrystalline silicon wafers of several bulk resistivities. The analysis of the results for the entire matrix indicates that bulk recombination is the dominant factor limiting the short circuit current in large grain (greater than 1 to 2 mm diameter) polycrystalline silicon, the same mechanism that limits the short circuit current in single crystal silicon. An experiment to investigate the limiting mechanisms of open circuit voltage and fill factor for large grain polycrystalline silicon is designed. Two process sequences to fabricate small cells are investigated.

  6. The effects of incomplete annealing on the temperature dependence of sheet resistance and gage factor in aluminum and phosphorus implanted silicon on sapphire

    NASA Technical Reports Server (NTRS)

    Pisciotta, B. P.; Gross, C.

    1976-01-01

    Partial annealing of damage to the crystal lattice during ion implantation reduces the temperature coefficient of resistivity of ion-implanted silicon, while facilitating controlled doping. Reliance on this method for temperature compensation of the resistivity and strain-gage factor is discussed. Implantation conditions and annealing conditions are detailed. The gage factor and its temperature variation are not drastically affected by crystal damage for some crystal orientations. A model is proposed to account for the effects of electron damage on the temperature dependence of resistivity and on silicon piezoresistance. The results are applicable to the design of silicon-on-sapphire strain gages with high gage factors.

  7. Real-time moving horizon estimation for a vibrating active cantilever

    NASA Astrophysics Data System (ADS)

    Abdollahpouri, Mohammad; Takács, Gergely; Rohaľ-Ilkiv, Boris

    2017-03-01

    Vibrating structures may be subject to changes throughout their operating lifetime due to a range of environmental and technical factors. These variations can be considered as parameter changes in the dynamic model of the structure, while their online estimates can be utilized in adaptive control strategies, or in structural health monitoring. This paper implements the moving horizon estimation (MHE) algorithm on a low-cost embedded computing device that is jointly observing the dynamic states and parameter variations of an active cantilever beam in real time. The practical behavior of this algorithm has been investigated in various experimental scenarios. It has been found, that for the given field of application, moving horizon estimation converges faster than the extended Kalman filter; moreover, it handles atypical measurement noise, sensor errors or other extreme changes, reliably. Despite its improved performance, the experiments demonstrate that the disadvantage of solving the nonlinear optimization problem in MHE is that it naturally leads to an increase in computational effort.

  8. Self-referenced silicon nitride array microring biosensor for toxin detection using glycans at visible wavelength

    NASA Astrophysics Data System (ADS)

    Ghasemi, Farshid; Eftekhar, Ali A.; Gottfried, David S.; Song, Xuezheng; Cummings, Richard D.; Adibi, Ali

    2013-02-01

    We report on application of on-chip referencing to improve the limit-of-detection (LOD) in compact silicon nitride (SiN) microring arrays. Microring resonators, fabricated by e-beam lithography and fluorine-based etching, are designed for visible wavelengths (656nm) and have a footprint of 20 x 20 μm. GM1 ganglioside is used as the specific ligand for recognition of Cholera Toxin Subunit B (CTB), with Ricinus Communis Agglutinin I (RCA I) as a negative control. Using micro-cantilever based printing less than 10 pL of glycan solution is consumed per microring. Real-time data on analyte binding is extracted from the shifts in resonance wavelengths of the microrings.

  9. Correction of Multiple Canine Impactions by Mixed Straightwire and Cantilever Mechanics: A Case Report

    PubMed Central

    Iodice, Giorgio; d'Antò, Vincenzo; Riccitiello, Francesco; Pellegrino, Gioacchino; Valletta, Rosa

    2014-01-01

    Background. This case report describes the orthodontic treatment of a woman, aged 17 years, with a permanent dentition, brachyfacial typology, Angle Class I, with full impaction of two canines (13,33), and a severe ectopy of the maxillary left canine. Her main compliant was the position of the ectopic teeth. Methods. Straightwire fixed appliances, together with cantilever mechanics, were used to correct the impaired occlusion and to obtain an ideal torque control. Results and Conclusion. The treatment objectives were achieved in 26 months of treatment. The impactions were fully corrected with an optimal torque. The cantilever mechanics succeeded in obtaining tooth repositioning in a short lapse of time. After treatment, the dental alignment was stable. PMID:25140261

  10. Correction of multiple canine impactions by mixed straightwire and cantilever mechanics: a case report.

    PubMed

    Paduano, Sergio; Cioffi, Iacopo; Iodice, Giorgio; d'Antò, Vincenzo; Riccitiello, Francesco; Pellegrino, Gioacchino; Valletta, Rosa

    2014-01-01

    Background. This case report describes the orthodontic treatment of a woman, aged 17 years, with a permanent dentition, brachyfacial typology, Angle Class I, with full impaction of two canines (13,33), and a severe ectopy of the maxillary left canine. Her main compliant was the position of the ectopic teeth. Methods. Straightwire fixed appliances, together with cantilever mechanics, were used to correct the impaired occlusion and to obtain an ideal torque control. Results and Conclusion. The treatment objectives were achieved in 26 months of treatment. The impactions were fully corrected with an optimal torque. The cantilever mechanics succeeded in obtaining tooth repositioning in a short lapse of time. After treatment, the dental alignment was stable.

  11. Nonlinear Elastic J-Integral Measurements in Mode I Using a Tapered Double Cantilever Beam Geometry

    NASA Technical Reports Server (NTRS)

    Macon, David J.

    2006-01-01

    An expression for the J-integral of a nonlinear elastic material is derived for an advancing crack in a tapered double cantilever beam fracture specimen. The elastic and plastic fracture energies related to the test geometry and how these energies correlates to the crack position are discussed. The dimensionless shape factors eta(sub el and eta(sub p) are shown to be equivalent and the deformation J-integral is analyzed in terms of the eta(sub el) function. The fracture results from a structural epoxy are interpreted using the discussed approach. The magnitude of the plastic dissipation is found to strongly depend upon the initial crack shape.

  12. A multi-damages identification method for cantilever beam based on mode shape curvatures and Kriging surrogate model

    NASA Astrophysics Data System (ADS)

    Xie, Fengle; Jiang, Zhansi; Jiang, Hui

    2018-05-01

    This paper presents a multi-damages identification method for Cantilever Beam. First, the damage location is identified by using the mode shape curvatures. Second, samples of varying damage severities at the damage location and their corresponding natural frequencies are used to construct the initial Kriging surrogate model. Then a particle swarm optimization (PSO) algorithm is employed to identify the damage severities based on Kriging surrogate model. The simulation study of a double-damaged cantilever beam demonstrated that the proposed method is effective.

  13. Small-scale characterisation of irradiated nuclear materials: Part II nanoindentation and micro-cantilever testing of ion irradiated nuclear materials

    NASA Astrophysics Data System (ADS)

    Armstrong, D. E. J.; Hardie, C. D.; Gibson, J. S. K. L.; Bushby, A. J.; Edmondson, P. D.; Roberts, S. G.

    2015-07-01

    This paper demonstrates the ability of advanced micro-mechanical testing methods, based on FIB machined micro-cantilevers, to measure the mechanical properties of ion implanted layers without the influence of underlying unimplanted material. The first section describes a study of iron-12 wt% chromium alloy implanted with iron ions. It is shown that by careful cantilever design and finite element modelling that changes in yield stress after implantation can be measured even with the influence of a strong size effect. The second section describes a study of tungsten implanted with both tungsten ions and tungsten and helium ions using spherical and sharp nanoindentation, and micro-cantilevers. The spherical indentation allows yield properties and work hardening behaviour of the implanted layers to be measured. However the brittle nature of the implanted tungsten is only revealed when using micro-cantilevers. This demonstrates that when applying micro-mechanical methods to ion implanted layers care is needed to understand the nature of size effects, careful modelling of experimental procedure is required and multiple experimental techniques are needed to allow the maximum amount of mechanical behaviour information to be collected.

  14. Multi-resonant wideband energy harvester based on a folded asymmetric M-shaped cantilever

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wu, Meng; Mao, Haiyang; Li, Zhigang

    2015-07-15

    This article reports a compact wideband piezoelectric vibration energy harvester consisting of three proof masses and an asymmetric M-shaped cantilever. The M-shaped beam comprises a main beam and two folded and dimension varied auxiliary beams interconnected through the proof mass at the end of the main cantilever. Such an arrangement constitutes a three degree-of-freedom vibrating body, which can tune the resonant frequencies of its first three orders close enough to obtain a utility wide bandwidth. The finite element simulation results and the experimental results are well matched. The operation bandwidth comprises three adjacent voltage peaks on account of the frequencymore » interval shortening mechanism. The result shows that the proposed piezoelectric energy harvester could be efficient and adaptive in practical vibration circumstance based on multiple resonant modes.« less

  15. Simultaneous Scanning Ion Conductance Microscopy and Atomic Force Microscopy with Microchanneled Cantilevers

    NASA Astrophysics Data System (ADS)

    Ossola, Dario; Dorwling-Carter, Livie; Dermutz, Harald; Behr, Pascal; Vörös, János; Zambelli, Tomaso

    2015-12-01

    We combined scanning ion conductance microscopy (SICM) and atomic force microscopy (AFM) into a single tool using AFM cantilevers with an embedded microchannel flowing into the nanosized aperture at the apex of the hollow pyramid. An electrode was positioned in the AFM fluidic circuit connected to a second electrode in the bath. We could thus simultaneously measure the ionic current and the cantilever bending (in optical beam deflection mode). First, we quantitatively compared the SICM and AFM contact points on the approach curves. Second, we estimated where the probe in SICM mode touches the sample during scanning on a calibration grid and applied the finding to image a network of neurites on a Petri dish. Finally, we assessed the feasibility of a double controller using both the ionic current and the deflection as input signals of the piezofeedback. The experimental data were rationalized in the framework of finite elements simulations.

  16. Screen printing of a capacitive cantilever-based motion sensor on fabric using a novel sacrificial layer process for smart fabric applications

    NASA Astrophysics Data System (ADS)

    Wei, Yang; Torah, Russel; Yang, Kai; Beeby, Steve; Tudor, John

    2013-07-01

    Free-standing cantilevers have been fabricated by screen printing sacrificial and structural layers onto a standard polyester cotton fabric. By printing additional conductive layers, a complete capacitive motion sensor on fabric using only screen printing has been fabricated. This type of free-standing structure cannot currently be fabricated using conventional fabric manufacturing processes. In addition, compared to conventional smart fabric fabrication processes (e.g. weaving and knitting), screen printing offers the advantages of geometric design flexibility and the ability to simultaneously print multiple devices of the same or different designs. Furthermore, a range of active inks exists from the printed electronics industry which can potentially be applied to create many types of smart fabric. Four cantilevers with different lengths have been printed on fabric using a five-layer structure with a sacrificial material underneath the cantilever. The sacrificial layer is subsequently removed at 160 °C for 30 min to achieve a freestanding cantilever above the fabric. Two silver electrodes, one on top of the cantilever and the other on top of the fabric, are used to capacitively detect the movement of the cantilever. In this way, an entirely printed motion sensor is produced on a standard fabric. The motion sensor was initially tested on an electromechanical shaker rig at a low frequency range to examine the linearity and the sensitivity of each design. Then, these sensors were individually attached to a moving human forearm to evaluate more representative results. A commercial accelerometer (Microstrain G-link) was mounted alongside for comparison. The printed sensors have a similar motion response to the commercial accelerometer, demonstrating the potential of a printed smart fabric motion sensor for use in intelligent clothing applications.

  17. Functionalization of MEMS cantilever beams for interconnect reliability investigation: development practice

    NASA Astrophysics Data System (ADS)

    Bieniek, T.; Janczyk, G.; Dobrowolski, R.; Wojciechowska, K.; Malinowska, A.; Panas, A.; Nieprzecki, M.; Kłos, H.

    2016-11-01

    This paper covers research results on development of the cantilevers beams test structures for interconnects reliability and robustness investigation. Presented results include design, modelling, simulation, optimization and finally fabrication stage performed on 4 inch Si wafers using the ITE microfabrication facility. This paper also covers experimental results from the test structures characterization.

  18. Valley dependent g-factor anisotropy in Silicon quantum dots

    NASA Astrophysics Data System (ADS)

    Ferdous, Rifat; Kawakami, Erika; Scarlino, Pasquale; Nowak, Michal; Klimeck, Gerhard; Friesen, Mark; Coppersmith, Susan N.; Eriksson, Mark A.; Vandersypen, Lieven M. K.; Rahman, Rajib

    Silicon (Si) quantum dots (QD) provide a promising platform for a spin based quantum computer, because of the exceptionally long spin coherence times in Si and the existing industrial infrastructure. Due to the presence of an interface and a vertical electric field, the two lowest energy states of a Si QD are primarily composed of two conduction band valleys. Confinement by the interface and the E-field not only affect the charge properties of these states, but also their spin properties through the spin-orbit interaction (SO), which differs significantly from the SO in bulk Si. Recent experiments have found that the g-factors of these states are different and dependent on the direction of the B-field. Using an atomistic tight-binding model, we investigate the electric and magnetic field dependence of the electron g-factor of the valley states in a Si QD. We find that the g-factors are valley dependent and show 180-degree periodicity as a function of an in-plane magnetic field orientation. However, atomic scale roughness can strongly affect the anisotropic g-factors. Our study helps to reconcile disparate experimental observations and to achieve better external control over electron spins in Si QD, by electric and magnetic fields.

  19. Self-assembling siloxane bilayer directly on SiO2 surface of micro-cantilevers for long-term highly repeatable sensing to trace explosives.

    PubMed

    Chen, Ying; Xu, Pengcheng; Li, Xinxin

    2010-07-02

    This paper presents a novel sensing layer modification technique for static micro-cantilever sensors that detect trace explosives by measuring specific adsorption-induced surface stress. For the first time, a method of directly modifying a siloxane sensing bilayer on an SiO(2) surface is proposed to replace the conventional self-assembled monolayers (SAMs) of thiols on Au to avoid the trouble from long-term unstable Au-S bonds. For modifying the long-term reliable sensing bilayer on the piezoresistor-integrated micro-cantilevers, a siloxane-head bottom layer is self-assembled directly on the SiO(2) cantilever surface, which is followed by grafting another explosive-sensing-group functionalized molecule layer on top of the siloxane layer. The siloxane-modified sensor has experimentally exhibited a highly resoluble response to 0.1 ppb TNT vapor. More importantly, the repeated detection results after 140 days show no obvious attenuation in sensing signal. Also observed experimentally, the specific adsorption of the siloxane sensing bilayer to TNT molecules causes a tensile surface stress on the cantilever. Herein the measured tensile surface stress is in contrast to the compressive surface stress normally measured from conventional cantilever sensors where the sensitive thiol-SAMs are modified on an Au surface. The reason for this newly observed phenomenon is discussed and preliminarily analyzed.

  20. Reprogramming hMSCs morphology with silicon/porous silicon geometric micro-patterns.

    PubMed

    Ynsa, M D; Dang, Z Y; Manso-Silvan, M; Song, J; Azimi, S; Wu, J F; Liang, H D; Torres-Costa, V; Punzon-Quijorna, E; Breese, M B H; Garcia-Ruiz, J P

    2014-04-01

    Geometric micro-patterned surfaces of silicon combined with porous silicon (Si/PSi) have been manufactured to study the behaviour of human Mesenchymal Stem Cells (hMSCs). These micro-patterns consist of regular silicon hexagons surrounded by spaced columns of silicon equilateral triangles separated by PSi. The results show that, at an early culture stage, the hMSCs resemble quiescent cells on the central hexagons with centered nuclei and actin/β-catenin and a microtubules network denoting cell adhesion. After 2 days, hMSCs adapted their morphology and cytoskeleton proteins from cell-cell dominant interactions at the center of the hexagonal surface. This was followed by an intermediate zone with some external actin fibres/β-catenin interactions and an outer zone where the dominant interactions are cell-silicon. Cells move into silicon columns to divide, migrate and communicate. Furthermore, results show that Runx2 and vitamin D receptors, both specific transcription factors for skeleton-derived cells, are expressed in cells grown on micropatterned silicon under all observed circumstances. On the other hand, non-phenotypic alterations are under cell growth and migration on Si/PSi substrates. The former consideration strongly supports the use of micro-patterned silicon surfaces to address pending questions about the mechanisms of human bone biogenesis/pathogenesis and the study of bone scaffolds.

  1. APPARATUS FOR NON-DESTRUCTIVE INSPECTION OF CANTILEVERED MEMBERS

    DOEpatents

    Taylor, E.R.; Mahoney, C.H.; Lay, C.R.

    1961-10-24

    An apparatus for non-destructive inspection of cantilevered members, such as compressor blades, is described. The member under inspection is vibrated with a regulated source of air under pressure. The amplitude of vibration of the member is maintained at its natural frequency. The frequency of vibration of the member is measured. An indication of an excessive decay or erratic shifting in the measured frequency above an allowable hysteretic decay is provided as an indication of a fault in the member. The member is vibrated for a selected test period. (AEC)

  2. SEMICONDUCTOR TECHNOLOGY Supercritical carbon dioxide process for releasing stuck cantilever beams

    NASA Astrophysics Data System (ADS)

    Yu, Hui; Chaoqun, Gao; Lei, Wang; Yupeng, Jing

    2010-10-01

    The multi-SCCO2 (supercritical carbon dioxide) release and dry process based on our specialized SCCO2 semiconductor process equipment is investigated and the releasing mechanism is discussed. The experiment results show that stuck cantilever beams were held up again under SCCO2 high pressure treatment and the repeatability of this process is nearly 100%.

  3. Tunable Q-factor silicon microring resonators for ultra-low power parametric processes.

    PubMed

    Strain, Michael J; Lacava, Cosimo; Meriggi, Laura; Cristiani, Ilaria; Sorel, Marc

    2015-04-01

    A compact silicon ring resonator is demonstrated that allows simple electrical tuning of the ring coupling coefficient and Q-factor and therefore the resonant enhancement of on-chip nonlinear optical processes. Fabrication-induced variation in designed coupling fraction, crucial in the resonator performance, can be overcome using this post-fabrication trimming technique. Tuning of the microring resonator across the critical coupling point is demonstrated, exhibiting a Q-factor tunable between 9000 and 96,000. Consequently, resonantly enhanced four-wave mixing shows tunable efficiency between -40 and -16.3  dB at an ultra-low on-chip pump power of 0.7 mW.

  4. Accurate characterization of wafer bond toughness with the double cantilever specimen

    NASA Astrophysics Data System (ADS)

    Turner, Kevin T.; Spearing, S. Mark

    2008-01-01

    The displacement loaded double cantilever test, also referred to as the "Maszara test" and the "crack opening method" by the wafer bonding community, is a common technique used to evaluate the interface toughness or surface energy of direct wafer bonds. While the specimen is widely used, there has been a persistent question as to the accuracy of the method since the actual specimen geometry differs from the ideal beam geometry assumed in the expression used for data reduction. The effect of conducting the test on whole wafer pairs, in which the arms of cantilevers are wide plates rather than slender beams, is examined in this work using finite element analysis. A model is developed to predict the equilibrium shape of the crack front and to develop a corrected expression for calculating interface toughness from crack length measurements obtained in tests conducted on whole wafer pairs. The finite element model, which is validated through comparison to experiments, demonstrates that using the traditional beam theory-based expressions for data reduction can lead to errors of up to 25%.

  5. Apertureless cantilever-free pen arrays for scanning photochemical printing.

    PubMed

    Zhou, Yu; Xie, Zhuang; Brown, Keith A; Park, Daniel J; Zhou, Xiaozhu; Chen, Peng-Cheng; Hirtz, Michael; Lin, Qing-Yuan; Dravid, Vinayak P; Schatz, George C; Zheng, Zijian; Mirkin, Chad A

    2015-02-25

    A novel, apertureless, cantilever-free pen array can be used for dual scanning photochemical and molecular printing. Serial writing with light is enabled by combining self-focusing pyramidal pens with an opaque backing between pens. The elastomeric pens also afford force-tuned illumination and simultaneous delivery of materials and optical energy. These attributes make the technique a promising candidate for maskless high-resolution photopatterning and combinatorial chemistry. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  6. Experimental and theoretical investigations of the quality factor for n+p silicon solar cells

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Garlick, G.F.J.; Kachare, A.H.

    1980-01-01

    Many N/sup +/P silicon cells made with silicon from different growth techniques have current-voltage relations of the form: I.I/sub 0/ (exp(qV/AkT) - 1) where the quality factor A is non-integral, is >1 and shows a temperature dependence. The dark forward characteristics of such cells have been measured over a range of temperature and the behavior of the factor A derived from them. A new model is presented on the assumption of non-uniform distributions of recombination levels in the junction depletion layer. This model shows good agreement with experimental data. The cells investigated had evaporated top metallization and so the junctionmore » contamination giving the recombination levels is likely to be a result of junction diffusion and is not specific to the metallization processing. The model needs further development and evaluation in order to apply it to the illuminated cell behavior and also to include any effects of distributed sheet resistance in the N/sup +/ layer. 17 refs.« less

  7. Energy Harvesting Characteristics from Water Flow by Piezoelectric Energy Harvester Device Using Cr/Nb Doped Pb(Zr,Ti)O3 Bimorph Cantilever

    NASA Astrophysics Data System (ADS)

    Kim, Kyoung-Bum; Kim, Chang Il; Jeong, Young Hun; Cho, Jeong-Ho; Paik, Jong-Hoo; Nahm, Sahn; Lim, Jong Bong; Seong, Tae-Hyeon

    2013-10-01

    A water flow energy harvester, which can convert water flow energy to electric energy, was fabricated for its application to rivers. This harvester can generate power from the bending and releasing motion of piezoelectric bimorph cantilevers. A Pb(Zr0.54Ti0.46)O3 + 0.2 wt % Cr2O3 + 1.0 wt % Nb2O5 (PZT-CN) thick film and a 250-µm-thick stainless steel were used as a bimorph cantilever. The electrical impedance matching was achieved across a resistive load of 1 kΩ. Four bimorph cantilevers can generate power from 5 to 105 rpm. The output powers were steadily increased by increasing the rpm. The maximum output power was 68 mW by 105 rpm. It was found that the water flow energy harvester can generate 58 mW by a flow velocity of (2 m/s) from the stream with the four bimorph cantilevers.

  8. Silicon halide-alkali metal flames as a source of solar grade silicon

    NASA Technical Reports Server (NTRS)

    Olsen, D. B.; Miller, W. J.

    1979-01-01

    The feasibility of using alkali metal-silicon halide diffusion flames to produce solar-grade silicon in large quantities and at low cost is demonstrated. Prior work shows that these flames are stable and that relatively high purity silicon can be produced using Na + SiCl4 flames. Silicon of similar purity is obtained from Na + SiF4 flames although yields are lower and product separation and collection are less thermochemically favored. Continuous separation of silicon from the byproduct alkali salt was demonstrated in a heated graphite reactor. The process was scaled up to reduce heat losses and to produce larger samples of silicon. Reagent delivery systems, scaled by a factor of 25, were built and operated at a production rate of 0.5 kg Si/h. Very rapid reactor heating rates are observed with wall temperatures reaching greater than 2000 K. Heat release parameters were measured using a cooled stainless steel reactor tube. A new reactor was designed.

  9. Analyzing the vibrational response of an AFM cantilever in liquid with the consideration of tip mass by comparing the hydrodynamic and contact repulsive force models in higher modes

    NASA Astrophysics Data System (ADS)

    Korayem, Moharam Habibnejad; Nahavandi, Amir

    2017-04-01

    This paper investigates the vibration of a tapping-mode Atomic Force Microscope (AFM) cantilever covered with two whole piezoelectric layers in a liquid medium. The authors of this article have already modeled the vibration of a cantilever immersed in liquid over rough surfaces. Five new ideas have been considered for improving the results of the previous work. Mass and damping of a cantilever probe tip have been considered. Since the probe tip of an AFM cantilever has a mass, which can itself affect the natural frequency of vibration, the significance of this mass has been explored. Also, two hydrodynamic force models for analyzing the mass and damping added to a cantilever in liquid medium have been evaluated. In modeling the vibration of a cantilever in liquid, simplifications are made to the theoretical equations used in the modeling, which may make the obtained results different from those in the real case. So, two hydrodynamic force models are introduced and compared with each other. In addition to the already introduced DMT model, the JKR model has been proposed. The forces acting on a probe tip have attractive and repulsive effects. The attractive Van der Waals force can vary depending on the surface smoothness or roughness, and the repulsive contact force, which is independent of the type of surface roughness and usually varies with the hardness or softness of a surface. When the first mode is used in the vibration of an AFM cantilever, the changes of the existing physical parameters in the simulation do not usually produce a significant difference in the response. Thus, three cantilever vibration modes have been investigated. Finally, an analytical approach for obtaining the response of equations is presented which solves the resulting motion equation by the Laplace method and, thus, a time function is obtained for cantilever deflection is determined. Also, using the COMSOL software to model a cantilever in a liquid medium, the computed natural

  10. Survival of anterior cantilevered all-ceramic resin-bonded fixed dental prostheses made from zirconia ceramic.

    PubMed

    Sasse, Martin; Kern, Matthias

    2014-06-01

    This study evaluated the clinical outcome of all-ceramic resin-bonded fixed dental prostheses (RBFDPs) with a cantilevered single-retainer design made from zirconia ceramic. Forty-two anterior RBFDPs with a cantilevered single-retainer design were made from yttrium oxide-stabilized zirconium oxide ceramic. RBFDPs were inserted using Panavia 21 TC as luting agent after air-abrasion of the ceramic bonding surface. During a mean observation time of 61.8 months two debondings occurred. Both RBFDPs were rebonded using Panavia 21 TC and are still in function. A caries lesion was detected at one abutment tooth during recall and was treated with a composite filling. Therefore, the overall six-year failure-free rate according to Kaplan-Meier was 91.1%. If only debonding was defined as failure the survival rate increased to 95.2%. Since all RBFDPs are still in function the overall survival rate was 100% after six years. Cantilevered zirconia ceramic RBFDPs showed promising results within the observation period. Single-retainer resin-bonded fixed dental prostheses made from zirconia ceramic show very good mid-term clinical survival rates. They should therefore be considered as a viable treatment alternative for the replacement of single missing anterior teeth especially as compared to an implant therapy. Copyright © 2014 Elsevier Ltd. All rights reserved.

  11. Microstructure factor and mechanical and electronic properties of hydrogenated amorphous and nanocrystalline silicon thin-films for microelectromechanical systems applications

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mouro, J.; Gualdino, A.; Chu, V.

    2013-11-14

    Thin-film silicon allows the fabrication of MEMS devices at low processing temperatures, compatible with monolithic integration in advanced electronic circuits, on large-area, low-cost, and flexible substrates. The most relevant thin-film properties for applications as MEMS structural layers are the deposition rate, electrical conductivity, and mechanical stress. In this work, n{sup +}-type doped hydrogenated amorphous and nanocrystalline silicon thin-films were deposited by RF-PECVD, and the influence of the hydrogen dilution in the reactive mixture, the RF-power coupled to the plasma, the substrate temperature, and the deposition pressure on the structural, electrical, and mechanical properties of the films was studied. Three differentmore » types of silicon films were identified, corresponding to three internal structures: (i) porous amorphous silicon, deposited at high rates and presenting tensile mechanical stress and low electrical conductivity, (ii) dense amorphous silicon, deposited at intermediate rates and presenting compressive mechanical stress and higher values of electrical conductivity, and (iii) nanocrystalline silicon, deposited at very low rates and presenting the highest compressive mechanical stress and electrical conductivity. These results show the combinations of electromechanical material properties available in silicon thin-films and thus allow the optimized selection of a thin silicon film for a given MEMS application. Four representative silicon thin-films were chosen to be used as structural material of electrostatically actuated MEMS microresonators fabricated by surface micromachining. The effect of the mechanical stress of the structural layer was observed to have a great impact on the device resonance frequency, quality factor, and actuation force.« less

  12. Parameter identification of partially covered piezoelectric cantilever power scavenger based on the coupled distributed parameter solution

    NASA Astrophysics Data System (ADS)

    Hosseini; Hamedi; Ebrahimi Mamaghani; Kim; Kim; Dayou

    2017-07-01

    Among the various techniques of power scavenging, piezoelectric energy harvesting usually has more power density. Although piezoceramics are usually more efficient than other piezoelectric materials, since they are very brittle and fragile, researchers are looking for alternative materials. Recently Cellulose Electro-active paper (EAPap) has been recognized as a smart material with piezoelectric behavior that can be used in energy scavenging systems. The majority of researches in energy harvesting area, use unimorph piezoelectric cantilever beams. This paper presents an analytical solution based on distributed parameter model for partially covered pieoelectric cantilever energy harvester. The purpose of the paper is to describe the changes in generated power with damping and the load resistance using analytical calculations. The analytical data are verified using experiment on a vibrating cantilever substrate that is partially covered by EAPap films. The results are very close to each other. Also asymptotic trends of the voltage, current and power outputs are investigated and expressions are obtained for the extreme conditions of the load resistance. These new findings provide guidelines for identification and manipulation of effective parameters in order to achieve the efficient performance in different ambient source conditions.

  13. Silicon isotope fractionation in bamboo and its significance to the biogeochemical cycle of silicon

    NASA Astrophysics Data System (ADS)

    Ding, T. P.; Zhou, J. X.; Wan, D. F.; Chen, Z. Y.; Wang, C. Y.; Zhang, F.

    2008-03-01

    A systematic investigation on silica contents and silicon isotope compositions of bamboos was undertaken. Seven bamboo plants and related soils were collected from seven locations in China. The roots, stem, branch and leaves for each plant were sampled and their silica contents and silicon isotope compositions were determined. The silica contents and silicon isotope compositions of bulk and water-soluble fraction of soils were also measured. The silica contents of studied bamboo organs vary from 0.30% to 9.95%. Within bamboo plant the silica contents show an increasing trend from stem, through branch, to leaves. In bamboo roots the silica is exclusively in the endodermis cells, but in stem, branch and leaves, the silica is accumulated mainly in epidermal cells. The silicon isotope compositions of bamboos exhibit significant variation, from -2.3‰ to 1.8‰, and large and systematic silicon isotope fractionation was observed within each bamboo. The δ 30Si values decrease from roots to stem, but then increase from stem, through branch, to leaves. The ranges of δ 30Si values within each bamboo vary from 1.0‰ to 3.3‰. Considering the total range of silicon isotope composition in terrestrial samples is only 7‰, the observed silicon isotope variation in single bamboo is significant and remarkable. This kind of silicon isotope variation might be caused by isotope fractionation in a Rayleigh process when SiO 2 precipitated in stem, branches and leaves gradually from plant fluid. In this process the Si isotope fractionation factor between dissolved Si and precipitated Si in bamboo ( αpre-sol) is estimated to be 0.9981. However, other factors should be considered to explain the decrease of δ 30Si value from roots to stem, including larger ratio of dissolved H 4SiO 4 to precipitated SiO 2 in roots than in stem. There is a positive correlation between the δ 30Si values of water-soluble fractions in soils and those of bulk bamboos, indicating that the dissolved

  14. Process Research on Polycrystalline Silicon Material (PROPSM)

    NASA Technical Reports Server (NTRS)

    Culik, J. S.

    1983-01-01

    The performance limiting mechanisms in large grain (greater than 1-2 mm in diameter) polycrystalline silicon was investigated by measuring the illuminated current voltage (I-V) characteristics of the minicell wafer set. The average short circuit current on different wafers is 3 to 14 percent lower than that of single crystal Czochralski silicon. The scatter was typically less than 3 percent. The average open circuit voltage is 20 to 60 mV less than that of single crystal silicon. The scatter in the open circuit voltage of most of the polycrystalline silicon wafers was 15 to 20 mV, although two wafers had significantly greater scatter than this value. The fill factor of both polycrystalline and single crystal silicon cells was typically in the range of 60 to 70 percent; however several polycrystalline silicon wafers have fill factor averages which are somewhat lower and have a significantly larger degree of scatter.

  15. Numerical simulation and experimentation of adjusting the curvatures of micro-cantilevers using the water-confined laser-generated plasma

    NASA Astrophysics Data System (ADS)

    Gu, Chunxing; Shen, Zongbao; Liu, Huixia; Li, Pin; Lu, Mengmeng; Zhao, Yinxin; Wang, Xiao

    2013-04-01

    This paper describes a precise and non-contact adjustment technique using the water-confined laser-generated plasma to adjust the curvature of micro-components (micro-mechanical cantilevers). A series of laser shock micro-adjustment experiments were conducted on 0.4 mm-thick Al samples using pulsed Nd:YAG lasers operating at 1064 nm wavelengths to verify the technical feasibility. Systematic study was carried out in the term of effects of various factors on the adjusting results, including laser energies, laser focus positions, laser shock times and confined regime configuration. The research results have shown that the different bending angles and bending directions can be obtained by changing the laser processing parameters. And, for the adjustment process, the absence of confined regime configuration could also generate suitable bending deformation. But, in the case of larger energy, the final surfaces would have the sign of ablation, hence resulting in poor surface quality. An analysis procedure including dynamic analysis performed by ANSYS/LS-DYNA and static analysis performed by ANSYS is presented in detail to attain the simulation of laser shock micro-adjustment to predict the final bending deformation. The predicted bending profiles is well correlated with the available experimental data, showing the finite element analysis can predict the final curvatures of the micro-cantilevers properly.

  16. 75 FR 13486 - Application(s) for Duty-Free Entry of Scientific Instruments

    Federal Register 2010, 2011, 2012, 2013, 2014

    2010-03-22

    ... nanostructures. This instrument combines an optical microscope with a scanning probe imaging system. Specifically... soft materials than other instruments, as it detects the probe coming close to the sample surface by... conventional AFM type silicon cantilevers as well as cantilevered optical fiber probes with exposed probe...

  17. Development and calibration of a compact self-sensing atomic force microscope head for micro-nano characterization

    NASA Astrophysics Data System (ADS)

    Guo, Tong; Wang, Siming; Zhao, Jian; Chen, Jinping; Fu, Xing; Hu, Xiaotang

    2011-12-01

    A compact self-sensing atomic force microscope (AFM) head is developed for the micro-nano dimensional measurement. This AFM head works in tapping mode equipped with a commercial self-sensing probe. This kind of probe can benefit not only from the tuning fork's stable resonant frequency and high quality factor but also from the silicon cantilever's reasonable spring constant. The head is convenient to operate by its simplicity of structure, since it does not need any optical detector to measure the bending of the cantilever. The compact structure makes the head ease to combine with other measuring methods. According to the probe"s characteristics, a method is proposed to quickly calculate the cantilever"s resonance amplitude through measuring its electro-mechanical coupling factor. An experiment system is established based on the nano-measuring machine (NMM) as a high precision positioning stage. Using this system, the approach/retract test is carried out for calibrating the head. The tests can be traced to the meter definition by interferometers in NMM. Experimental results show that the non-linearity error of this AFM head is smaller than 1%, the sensitivity reaches 0.47nm/mV and the measurement stroke is several hundreds of nanometers.

  18. Fabrication and evaluation of a graphene oxide-based cantilever-type flow-meter for subsonic gas flow rate measurement

    NASA Astrophysics Data System (ADS)

    Hamdollahi, Hassan; Rahbar-Shahrouzi, Javad

    2018-05-01

    In this paper, a cantilever-type flow meter was fabricated to measure the rate of air flow in turbulent subsonic regimes such as purged gases. In the fabrication process, a piezoresistive material was coated on an interdigitated electric board as a substrate. The piezoresistive layer was a blend of latex as the polymeric matrix and graphene oxide as the sensing nanomaterial agent, which was reduced by solvothermal reduction method. The piezoresistive blend was dip-coated on a substrate with dotted pattern and was then reduced at 240 °C for 1 h in every coating step. When an air flow passed over the surface of the cantilever beam, the beam was bent in the downward direction, resulting in small variations in the resistance of the piezoresistive layer and a change in the bending angle of the cantilever which were measured simultaneously. The air flow rate was acquired via calibrating electrical resistance changes by Arduino and Wheatstone bridge circuit. The blending angle of the substrate caused by the interaction between the airflow and the cantilever and recorded by the camera and image processing was ultimately compared with the simulation results. The flow meter accuracy as a percentage of full scale (% FS) was calculated to be  ±5.8%, and mean deviation was equal to 2.1 (% FS) with the appropriate response time of 0.70 s at the air flow range of 100‑240 m s‑1. Highlights • A cantilever-type flow meter was fabricated to measure the high-speed air flow rate. • The sensitive piezoresistive material was composed of GO and latex. • The dip-coating method was used to deposit the piezoresistive layer on the fiberglass substrate. • The impact of effective parameters on the performance of the flow meter was investigated. • A simulation study was performed and the results were compared with the experimental data.

  19. Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

    PubMed

    Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

    2010-04-02

    Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

  20. Actuating Mechanism and Design of a Cylindrical Traveling Wave Ultrasonic Motor Using Cantilever Type Composite Transducer

    PubMed Central

    Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

    2010-01-01

    Background Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. Principal Findings A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. Conclusions The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor. PMID:20368809

  1. Experimental characterization of cantilever-type piezoelectric generator operating at resonance for vibration energy harvesting

    NASA Astrophysics Data System (ADS)

    Montanini, Roberto; Quattrocchi, Antonino

    2016-06-01

    A cantilever-type resonant piezoelectric generator (RPG) has been designed by gluing a PZT patch working in d31 mode onto a glass fibre reinforced composite cantilever beam with a discrete mass applied on its free end. The electrical and dynamic behaviour of the RPG prototype has been investigated by carrying out laboratory tests aimed to assess the effect of definite design parameters, specifically the electric resistance load and the excitation frequency. Results showed that an optimum resistance load exists, at which power generation is maximized. Moreover, it has been showed that power generation is strongly influenced by the vibration frequency highlighting that, at resonance, output power can be increased by more than one order of magnitude. Possible applications include inertial resonant harvester for energy recovery from vibrating machines, sea waves or wind flux and self-powering of wireless sensor nodes.

  2. Cantilevered multilevel LIGA devices and methods

    DOEpatents

    Morales, Alfredo Martin; Domeier, Linda A.

    2002-01-01

    In the formation of multilevel LIGA microstructures, a preformed sheet of photoresist material, such as polymethylmethacrylate (PMMA) is patterned by exposure through a mask to radiation, such as X-rays, and developed using a developer to remove the exposed photoresist material. A first microstructure is then formed by electroplating metal into the areas from which the photoresist has been removed. Additional levels of microstructure are added to the initial microstructure by covering the first microstructure with a conductive polymer, machining the conductive polymer layer to reveal the surface of the first microstructure, sealing the conductive polymer and surface of the first microstructure with a metal layer, and then forming the second level of structure on top of the first level structure. In such a manner, multiple layers of microstructure can be built up to allow complex cantilevered microstructures to be formed.

  3. Fifteen-year survival of anterior all-ceramic cantilever resin-bonded fixed dental prostheses.

    PubMed

    Kern, Matthias

    2017-01-01

    The aim of this follow-up study was to report the long-term outcome of all-ceramic cantilever resin-bonded fixed dental prostheses (RBFDPs). In 16 patients (mean age of 33.3±17.5years) 22 RBFDPs made from a glass-infiltrated alumina ceramic (In-Ceram) were inserted with a phosphate monomer containing luting agent after air-abrasion of the retainer wings. The abutment preparation included a shallow groove on the cingulum and a small proximal box. The restorations replacing 16 maxillary and 6 mandibular incisors were followed over a mean observation time of 188.7 months. No restoration debonded. Two RBFDPs fractured and were lost 48 and 214 months after insertion, respectively. The 10-year and 15-year survival rates were both 95.4% and dropped to 81.8% after 18 years. Anterior all-ceramic cantilever RBFDPs exhibited an excellent clinical longevity. Copyright © 2016 Elsevier Ltd. All rights reserved.

  4. Gamma radiation effects on silicon photonic waveguides.

    PubMed

    Grillanda, Stefano; Singh, Vivek; Raghunathan, Vivek; Morichetti, Francesco; Melloni, Andrea; Kimerling, Lionel; Agarwal, Anuradha M

    2016-07-01

    To support the use of integrated photonics in harsh environments, such as outer space, the hardness threshold to high-energy radiation must be established. Here, we investigate the effects of gamma (γ) rays, with energy in the MeV-range, on silicon photonic waveguides. By irradiation of high-quality factor amorphous silicon core resonators, we measure the impact of γ rays on the materials incorporated in our waveguide system, namely amorphous silicon, silicon dioxide, and polymer. While we show the robustness of amorphous silicon and silicon dioxide up to an absorbed dose of 15 Mrad, more than 100× higher than previous reports on crystalline silicon, polymer materials exhibit changes with doses as low as 1 Mrad.

  5. Enhanced Raman scattering in porous silicon grating.

    PubMed

    Wang, Jiajia; Jia, Zhenhong; Lv, Changwu

    2018-03-19

    The enhancement of Raman signal on monocrystalline silicon gratings with varying groove depths and on porous silicon grating were studied for a highly sensitive surface enhanced Raman scattering (SERS) response. In the experiment conducted, porous silicon gratings were fabricated. Silver nanoparticles (Ag NPs) were then deposited on the porous silicon grating to enhance the Raman signal of the detective objects. Results show that the enhancement of Raman signal on silicon grating improved when groove depth increased. The enhanced performance of Raman signal on porous silicon grating was also further improved. The Rhodamine SERS response based on Ag NPs/ porous silicon grating substrates was enhanced relative to the SERS response on Ag NPs/ porous silicon substrates. Ag NPs / porous silicon grating SERS substrate system achieved a highly sensitive SERS response due to the coupling of various Raman enhancement factors.

  6. LTCC-based differential photo acoustic cell for ppm gas sensing

    NASA Astrophysics Data System (ADS)

    Karioja, P.; Keränen, K.; Kautio, K.; Ollila, J.; Heikkinen, M.; Kauppinen, I.; Kuusela, T.; Matveev, B.; McNie, M. E.; Jenkins, R. M.; Palve, J.

    2010-04-01

    Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were less than 2.0 ×10-9 atm×cm3/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermetic level

  7. Differential photo-acoustic gas cell based on LTCC for ppm gas sensing

    NASA Astrophysics Data System (ADS)

    Keränen, K.; Kautio, K.; Ollila, J.; Heikkinen, M.; Kauppinen, I.; Kuusela, T.; Matveev, B.; McNie, M. E.; Jenkins, R. M.; Karioja, P.

    2010-02-01

    Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo-acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were under 2.0 ×10-9 atm×cm3/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermeticity level

  8. Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application.

    PubMed

    Kim, Moonkeun; Hwang, Beomseok; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

    2012-07-01

    We designed and fabricated a bimorph Pb(Zr,Ti)O3 (PZT) cantilever with an integrated Si proof mass to obtain a low resonant frequency for an energy harvesting application. The cantilevers were fabricated on the micro-electromechanical systems (MEMS) scale. A mode of piezoelectric conversions were d31 and d33 mode in cantilever vibration Therefore, we designed and fabricated a single cantilever with d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes. Finally, we fabricated a device with beam dimensions of about 5,400 microm x 480 microm x 14 microm (< +/- 5%), and an integrated Si proof mass with dimensions of about 1,481 microm x 988 microm x 450 microm (< +/- 5%). In order to measure the d31 and d33 modes, we fabricated top and bottom electrodes. The distance between the top electrodes was 50 microm and the resonant frequency was 89.4 Hz. The average powers of the d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes were 3.90, 9.60, 21.42, and 22.47 nW at 0.8 g (g = 9.8 m/s2) and optimal resistance, respectively.

  9. Disimpaction of maxillary canines using temporary bone anchorage and cantilever springs.

    PubMed

    Thebault, Benoit; Dutertre, Eric

    2015-03-01

    Impacted canines, particularly in the maxilla, are frequently encountered in orthodontic practice. Unfortunately, depending on their position, correction can often be difficult and sometimes unsuccessful. Thorough diagnosis along with orthodontic treatment combining bone-supported anchorage and cantilever springs appears, in our view, to offer the best solution to this tricky orthodontic challenge while limiting, as far as possible, the risk of failure. Copyright © 2015. Published by Elsevier Masson SAS.

  10. Experimental characterization of cantilever-type piezoelectric generator operating at resonance for vibration energy harvesting

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Montanini, Roberto, E-mail: rmontanini@unime.it; Quattrocchi, Antonino, E-mail: aquattrocchi@unime.it

    A cantilever-type resonant piezoelectric generator (RPG) has been designed by gluing a PZT patch working in d{sub 31} mode onto a glass fibre reinforced composite cantilever beam with a discrete mass applied on its free end. The electrical and dynamic behaviour of the RPG prototype has been investigated by carrying out laboratory tests aimed to assess the effect of definite design parameters, specifically the electric resistance load and the excitation frequency. Results showed that an optimum resistance load exists, at which power generation is maximized. Moreover, it has been showed that power generation is strongly influenced by the vibration frequencymore » highlighting that, at resonance, output power can be increased by more than one order of magnitude. Possible applications include inertial resonant harvester for energy recovery from vibrating machines, sea waves or wind flux and self-powering of wireless sensor nodes.« less

  11. Thermal and Kerr nonlinear properties of plasma-deposited silicon nitride/ silicon dioxide waveguides.

    PubMed

    Ikeda, Kazuhiro; Saperstein, Robert E; Alic, Nikola; Fainman, Yeshaiahu

    2008-08-18

    We introduce and present experimental evaluations of loss and nonlinear optical response in a waveguide and an optical resonator, both implemented with a silicon nitride/ silicon dioxide material platform prepared by plasma-enhanced chemical vapor deposition with dual frequency reactors that significantly reduce the stress and the consequent loss of the devices. We measure a relatively small loss of approximately 4dB/cm in the waveguides. The fabricated ring resonators in add-drop and all-pass arrangements demonstrate quality factors of Q=12,900 and 35,600. The resonators are used to measure both the thermal and ultrafast Kerr nonlinearities. The measured thermal nonlinearity is larger than expected, which is attributed to slower heat dissipation in the plasma-deposited silicon dioxide film. The n2 for silicon nitride that is unknown in the literature is measured, for the first time, as 2.4 x 10(-15)cm(2)/W, which is 10 times larger than that for silicon dioxide.

  12. Deflection of a flexural cantilever beam

    NASA Astrophysics Data System (ADS)

    Sherbourne, A. N.; Lu, F.

    The behavior of a flexural elastoplastic cantilever beam is investigated in which geometric nonlinearities are considered. The result of an elastica analysis by Frisch-Fay (1962) is extended to include postyield behavior. Although a closed-form solution is not possible, as in the elastic case, simple algebraic equations are derived involving only one unknown variable, which can also be expressed in the standard form of elliptic integrals if so desired. The results, in comparison with those of the small deflection analyses, indicate that large deflection analyses are necessary when the relative depth of the beam is very small over the length. The present exact solution can be used as a reference by those who resort to a finite element method for more complicated problems. It can also serve as a building block to other beam problems such as a simply supported beam or a beam with multiple loads.

  13. Analysis of Cantilever-Beam Bending Stress Relaxation Properties of Thin Wood Composites

    Treesearch

    John F. Hunt; Houjiang Zhang; Yan Huang

    2015-01-01

    An equivalent strain method was used to analyze and determine material relaxation properties for specimens from particleboard, high density fiberboard, and medium density fiberboard. Cantilever beams were clamped and then deflected to 11 m and held for either 2 h or 3 h, while the load to maintain that deflection was measured vs. time. Plots of load relaxation for each...

  14. Improvement of vibration energy harvesters mechanical Q-factor through high density proof mass integration

    NASA Astrophysics Data System (ADS)

    Dompierre, A.; Fréchette, L. G.

    2016-11-01

    This paper reports on improvement of the mechanical Q-factor of resonant energy harvesters at ambient pressure via the use of tungsten proof masses by evaluating the impact of the mass size and density on the squeeze film damping. To this end, a simplified model is first proposed to evaluate cantilever beams deflection and the resulting fluid pressure build up between the mass and a near surface. The model, which accounts for simultaneous transverse and rotational motion of very long tip masses as well as for 2D fluid flow in the gap, is used to extract a scaling law for the device fluidic Q-factor Qf. This law states that Qf can be improved by either increasing the linear mass density of the tip mass or by reducing the side lengths compared to the gap height. The first approach is validated experimentally by adding a tungsten proof mass on a silicon based device and observing an improvement of the Q-factor by 103%, going from 430 to 871, while the resonance frequency drops from 457 to 127 Hz. In terms of fluidic Q-factor, this represents an increase from 562 to 1673. These results successfully demonstrate the benefits of integrating a tungsten mass to reduce the fluid losses while potentially reducing the device footprint.

  15. Development of liquid-environment frequency modulation atomic force microscope with low noise deflection sensor for cantilevers of various dimensions

    NASA Astrophysics Data System (ADS)

    Fukuma, Takeshi; Jarvis, Suzanne P.

    2006-04-01

    We have developed a liquid-environment frequency modulation atomic force microscope (FM-AFM) with a low noise deflection sensor for a wide range of cantilevers with different dimensions. A simple yet accurate equation describing the theoretical limit of the optical beam deflection method in air and liquid is presented. Based on the equation, we have designed a low noise deflection sensor. Replaceable microscope objective lenses are utilized for providing a high magnification optical view (resolution: <3μm) as well as for focusing a laser beam (laser spot size: ˜10μm). Even for a broad range of cantilevers with lengths from 35to125μm, the sensor provides deflection noise densities of less than 11fm/√Hz in air and 16fm/√Hz in water. In particular, a cantilever with a length of 50μm gives the minimum deflection noise density of 5.7fm/√Hz in air and 7.3fm/√Hz in water. True atomic resolution of the developed FM-AFM is demonstrated by imaging mica in water.

  16. Modeling bicortical screws under a cantilever bending load.

    PubMed

    James, Thomas P; Andrade, Brendan A

    2013-12-01

    Cyclic loading of surgical plating constructs can precipitate bone screw failure. As the frictional contact between the plate and the bone is lost, cantilever bending loads are transferred from the plate to the head of the screw, which over time causes fatigue fracture from cyclic bending. In this research, analytical models using beam mechanics theory were developed to describe the elastic deflection of a bicortical screw under a statically applied load. Four analytical models were developed to simulate the various restraint conditions applicable to bicortical support of the screw. In three of the models, the cortical bone near the tip of the screw was simulated by classical beam constraints (1) simply supported, (2) cantilever, and (3) split distributed load. In the final analytical model, the cortices were treated as an elastic foundation, whereby the response of the constraint was proportional to screw deflection. To test the predictive ability of the new analytical models, 3.5 mm cortical bone screws were tested in a synthetic bone substitute. A novel instrument was developed to measure the bending deflection of screws under radial loads (225 N, 445 N, and 670 N) applied by a surrogate surgical plate at the head of the screw. Of the four cases considered, the analytical model utilizing an elastic foundation most accurately predicted deflection at the screw head, with an average difference of 19% between the measured and predicted results. Determination of the bending moments from the elastic foundation model revealed that a maximum moment of 2.3 N m occurred near the middle of the cortical wall closest to the plate. The location of the maximum bending moment along the screw axis was consistent with the fracture location commonly observed in clinical practice.

  17. Note: High-efficiency broadband acoustic energy harvesting using Helmholtz resonator and dual piezoelectric cantilever beams

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Yang, Aichao; Li, Ping, E-mail: liping@cqu.edu.cn; Wen, Yumei

    2014-06-15

    A high-efficiency broadband acoustic energy harvester consisting of a compliant-top-plate Helmholtz resonator (HR) and dual piezoelectric cantilever beams is proposed. Due to the high mechanical quality factor of beams and the strong multimode coupling of HR cavity, top plate and beams, the high efficiency in a broad bandwidth is obtained. Experiment exhibits that the proposed harvester at 170–206 Hz has 28–188 times higher efficiency than the conventional harvester using a HR with a piezoelectric composite diaphragm. For input acoustic pressure of 2.0 Pa, the proposed harvester exhibits 0.137–1.43 mW output power corresponding to 0.035–0.36 μW cm{sup −3} volume power density atmore » 170–206 Hz.« less

  18. An elastography method based on the scanning contact resonance of a piezoelectric cantilever

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Fu, Ji; Li, Faxin, E-mail: lifaxin@pku.edu.cn

    2013-12-15

    Purpose: Most tissues may become significantly stiffer than their normal states when there are lesions inside. The tissue's modulus can then act as an identification parameter for clinic diagnosis of tumors or fibrosis, which leads to elastography. This study introduces a novel elastography method that can be used for modulus imaging of superficial organs. Methods: This method is based on the scanning contact-resonance of a unimorph piezoelectric cantilever. The cantilever vibrates in its bending mode with the tip pressed tightly on the sample. The contact resonance frequency of the cantilever-sample system is tracked at each scanning point, from which themore » sample's modulus can be derived based on a beam dynamic model and a contact mechanics model. Scanning is performed by a three-dimensional motorized stage and the whole system is controlled by a homemade software program based on LabVIEW. Results: Testing onin vitro beef tissues indicates that the fat and the muscle can be easily distinguished using this system, and the accuracy of the modulus measurement can be comparable with that of nanoindentation. Imaging on homemade gelatin phantoms shows that the depth information of the abnormalities can be qualitatively obtained by varying the pressing force. The detection limit of this elastography method is specially examined both experimentally and numerically. Results show that it can detect the typical lesions in superficial organs with the depth of several centimeters. The lateral resolution of this elastography method/system is better than 0.5 mm, and could be further enhanced by using more scanning points. Conclusions: The proposed elastography system can be regarded as a sensitive palpation robot, which may be very promising in early diagnosis of tumors in superficial organs such as breast and thyroid.« less

  19. The effects of loading on the preload and dimensions of the abutment screw for a 3-unit cantilever-fixed prosthesis design.

    PubMed

    Setia, Gaurav; Yousef, Hoda; Ehrenberg, David; Luke, Allyn; Weiner, Saul

    2013-08-01

    The purpose of this study was to use an in vitro model system to compare the effects on the screw torque and screw dimensions within 2 commercially available implant systems from occlusal loading on a cantilevered-fixed partial denture. Cantilevered implant-supported 3-unit prostheses with 2 premolar abutments and 1 premolar pontic (7.3 mm in length) were made on resin casts containing 2 implant analogs for 2 implant systems: BioLok Silhouette Tapered Implant System (Birmingham, AL) and Zimmer Tapered Screw-Vent Implant System (Carlsbad, CA) with 10 samples in each group. Each sample was loaded with either of 2 protocols: (1) a load of 50 N on the cantilevered pontic unit and (2) a loading of 150 N on all 3 units. The outcome measures were (1) changes in residual torque of the abutment screws and (2) changes in screw dimension. The BioLok Silhouette Tapered Implant group demonstrated slight but statistically significant torque loss 18.8% to 28.5% in both abutment screws for both protocols, P ≤ 0.05, without any changes in screw dimension. In the Zimmer Tapered Screw-Vent Implant group, there was a significant elongation of the abutment screws and a markedly significant 44.4%, (P ≤ 0.01) loss in torque in the mesial screw and a 28.5%, (P ≤ 0.05) loss in torque in the distal screw when the cantilever alone was loaded. Differences in screw design influence the maintenance of preload and distortion of the shank. The influence of the interface design, namely an internal hex of 1 mm versus an external hex did not influence the preload. Cantilevered prostheses can cause loss of torque and dimensional changes in abutment screws.

  20. Fabricating amorphous silicon solar cells by varying the temperature _of the substrate during deposition of the amorphous silicon layer

    DOEpatents

    Carlson, David E.

    1982-01-01

    An improved process for fabricating amorphous silicon solar cells in which the temperature of the substrate is varied during the deposition of the amorphous silicon layer is described. Solar cells manufactured in accordance with this process are shown to have increased efficiencies and fill factors when compared to solar cells manufactured with a constant substrate temperature during deposition of the amorphous silicon layer.

  1. Stability enhancement of an atomic force microscope for long-term force measurement including cantilever modification for whole cell deformation

    NASA Astrophysics Data System (ADS)

    Weafer, P. P.; McGarry, J. P.; van Es, M. H.; Kilpatrick, J. I.; Ronan, W.; Nolan, D. R.; Jarvis, S. P.

    2012-09-01

    Atomic force microscopy (AFM) is widely used in the study of both morphology and mechanical properties of living cells under physiologically relevant conditions. However, quantitative experiments on timescales of minutes to hours are generally limited by thermal drift in the instrument, particularly in the vertical (z) direction. In addition, we demonstrate the necessity to remove all air-liquid interfaces within the system for measurements in liquid environments, which may otherwise result in perturbations in the measured deflection. These effects severely limit the use of AFM as a practical tool for the study of long-term cell behavior, where precise knowledge of the tip-sample distance is a crucial requirement. Here we present a readily implementable, cost effective method of minimizing z-drift and liquid instabilities by utilizing active temperature control combined with a customized fluid cell system. Long-term whole cell mechanical measurements were performed using this stabilized AFM by attaching a large sphere to a cantilever in order to approximate a parallel plate system. An extensive examination of the effects of sphere attachment on AFM data is presented. Profiling of cantilever bending during substrate indentation revealed that the optical lever assumption of free ended cantilevering is inappropriate when sphere constraining occurs, which applies an additional torque to the cantilevers "free" end. Here we present the steps required to accurately determine force-indentation measurements for such a scenario. Combining these readily implementable modifications, we demonstrate the ability to investigate long-term whole cell mechanics by performing strain controlled cyclic deformation of single osteoblasts.

  2. Effects of Cement, Abutment Surface Pretreatment, and Artificial Aging on the Force Required to Detach Cantilever Fixed Dental Prostheses from Dental Implants.

    PubMed

    Kappel, Stefanie; Chepura, Taras; Schmitter, Marc; Rammelsberg, Peter; Rues, Stefan

    To examine the in vitro effects of different cements, abutment surface preconditioning, and artificial aging on the maximum tensile force needed to detach cantilever fixed dental prostheses (FDPs) from dental implants with titanium abutments. A total of 32 tissue-level implants were combined with standardized titanium abutments. For each test group, eight cantilever FDPs were fabricated using selective laser melting (cobalt-chromium [CoCr] alloy). The inner surfaces of the cantilever FDPs and half of the abutments were sandblasted and then joined by use of four different cements (two permanent and two semi-permanent) in two different amounts per cement. Subgroups were tested after either artificial aging (thermocycling and chewing simulation) or 3 days of water storage. Finally, axial pull off-tests were performed for each abutment separately. Cement type and surface pretreatment significantly affected decementation behavior. The highest retention forces (approximately 1,200 N) were associated with sandblasted abutments and permanent cements. With unconditioned abutments, temporary cements (Fu < 100 N), as well as glass-ionomer cement (Fu ≈ 100 N), resulted in rather low retention forces. Zinc phosphate cement guaranteed high retention forces. After aging, retention was sufficient only for cementation with zinc phosphate cement and for the combination of sandblasted abutments and glass-ionomer cement. When glass-ionomer cement is used to fix cantilever FDPs on implants, sandblasting of standard titanium abutments may help prevent loss of retention. Retention forces were still high for FDPs fixed with zinc phosphate cement, even when the abutments were not pretreated. Use of permanent cements only, however, is recommended to prevent unwanted loosening of cantilever FDPs.

  3. Characterizing the reliability of a bioMEMS-based cantilever sensor

    NASA Astrophysics Data System (ADS)

    Bhalerao, Kaustubh D.

    2004-12-01

    The cantilever-based BioMEMS sensor represents one instance from many competing ideas of biosensor technology based on Micro Electro Mechanical Systems. The advancement of BioMEMS from laboratory-scale experiments to applications in the field will require standardization of their components and manufacturing procedures as well as frameworks to evaluate their performance. Reliability, the likelihood with which a system performs its intended task, is a compact mathematical description of its performance. The mathematical and statistical foundation of systems-reliability has been applied to the cantilever-based BioMEMS sensor. The sensor is designed to detect one aspect of human ovarian cancer, namely the over-expression of the folate receptor surface protein (FR-alpha). Even as the application chosen is clinically motivated, the objective of this study was to demonstrate the underlying systems-based methodology used to design, develop and evaluate the sensor. The framework development can be readily extended to other BioMEMS-based devices for disease detection and will have an impact in the rapidly growing $30 bn industry. The Unified Modeling Language (UML) is a systems-based framework for design and development of object-oriented information systems which has potential application for use in systems designed to interact with biological environments. The UML has been used to abstract and describe the application of the biosensor, to identify key components of the biosensor, and the technology needed to link them together in a coherent manner. The use of the framework is also demonstrated in computation of system reliability from first principles as a function of the structure and materials of the biosensor. The outcomes of applying the systems-based framework to the study are the following: (1) Characterizing the cantilever-based MEMS device for disease (cell) detection. (2) Development of a novel chemical interface between the analyte and the sensor that provides a

  4. Principle design and actuation of a dual chamber electromagnetic micropump with coaxial cantilever valves.

    PubMed

    Zordan, Enrico; Amirouche, Farid; Zhou, Yu

    2010-02-01

    This paper deals with the design and characterization of an electromagnetic actuation micropump with superimposed dual chambers. An integral part of microfluidic system includes micropumps which have become a critical design focus and have the potential to alter treatment and drug delivery requirements to patients. In this paper, conceptual design of variable geometrical nozzle/diffuser elements, coaxial cantilever valve, is proposed. It takes advantages of cantilever fluctuating valves with preset geometry to optimize and control fluid flow. The integration of this conceptual valve into a dual chamber micropump has increased the flow rate when compared to a single chamber micropump. This technique also allows for the fluid flow to be actively controlled by adjusting the movement of the intermediate membrane and the cantilever valves due to their fast response and large deflection properties when subjected to an electromagnetic field. To ensure reliability and performance of both the membrane and electromagnets, finite element method was used to perform the stress-strain analysis and optimize the membrane structure and electromagnet configuration. The frequency-dependent flow rates and backpressure are investigated for different frequencies by varying the applied currents from 1A to 1.75A. The current micropump design exhibits a backpressure of 58 mmH(2)O and has a water flow rate that reaches maximum at 1.985 ml/s under a 1.75A current with a resonance frequency of 45 Hz. This proposed micropump while at its initial prototype stage can satisfy the requirements of wide flow rate drug delivery applications. Its controllability and process design are attractive for high volume fabrication and low cost.

  5. The control of flexible structure vibrations using a cantilevered adaptive truss

    NASA Technical Reports Server (NTRS)

    Wynn, Robert H., Jr.; Robertshaw, Harry H.

    1991-01-01

    Analytical and experimental procedures and design tools are presented for the control of flexible structure vibrations using a cantilevered adaptive truss. Simulated and experimental data are examined for three types of structures: a slender beam, a single curved beam, and two curved beams. The adaptive truss is shown to produce a 6,000-percent increase in damping, demonstrating its potential in vibration control. Good agreement is obtained between the simulated and experimental data, thus validating the modeling methods.

  6. Silicide/Silicon Hetero-Junction Structure for Thermoelectric Applications.

    PubMed

    Jun, Dongsuk; Kim, Soojung; Choi, Wonchul; Kim, Junsoo; Zyung, Taehyoung; Jang, Moongyu

    2015-10-01

    We fabricated silicide/silicon hetero-junction structured thermoelectric device by CMOS process for the reduction of thermal conductivity with the scatterings of phonons at silicide/silicon interfaces. Electrical conductivities, Seebeck coefficients, power factors, and temperature differences are evaluated using the steady state analysis method. Platinum silicide/silicon multilayered structure showed an enhanced Seebeck coefficient and power factor characteristics, which was considered for p-leg element. Also, erbium silicide/silicon structure showed an enhanced Seebeck coefficient, which was considered for an n-leg element. Silicide/silicon multilayered structure is promising for thermoelectric applications by reducing thermal conductivity with an enhanced Seebeck coefficient. However, because of the high thermal conductivity of the silicon packing during thermal gradient is not a problem any temperature difference. Therefore, requires more testing and analysis in order to overcome this problem. Thermoelectric generators are devices that based on the Seebeck effect, convert temperature differences into electrical energy. Although thermoelectric phenomena have been used for heating and cooling applications quite extensively, it is only in recent years that interest has increased in energy generation.

  7. Double Cantilever Beam Fracture Toughness Testing of Several Composite Materials

    NASA Technical Reports Server (NTRS)

    Kessler, Jeff A.; Adams, Donald F.

    1992-01-01

    Double-cantilever beam fracture toughness tests were performed by the Composite Materials Research Group on several different unidirectional composite materials provided by NASA Langley Research Center. The composite materials consisted of Hercules IM-7 carbon fiber and various matrix resin formulations. Multiple formulations of four different families of matrix resins were tested: LaRC - ITPI, LaRC - IA, RPT46T, and RP67/RP55. Report presents the materials tested and pertinent details supplied by NASA. For each material, three replicate specimens were tested. Multiple crack extensions were performed on each replicate.

  8. Microfluidic flow rate detection based on integrated optical fiber cantilever.

    PubMed

    Lien, Victor; Vollmer, Frank

    2007-10-01

    We demonstrate an integrated microfluidic flow sensor with ultra-wide dynamic range, suitable for high throughput applications such as flow cytometry and particle sorting/counting. A fiber-tip cantilever transduces flow rates to optical signal readout, and we demonstrate a dynamic range from 0 to 1500 microL min(-1) for operation in water. Fiber-optic sensor alignment is guided by preformed microfluidic channels, and the dynamic range can be adjusted in a one-step chemical etch. An overall non-linear response is attributed to the far-field angular distribution of single-mode fiber output.

  9. Sensing technology for damage assessment of sign supports and cantilever poles : final report, August 31, 2010.

    DOT National Transportation Integrated Search

    2010-08-31

    This report presents the results of research activities conducted under Contract No. 519691-PIT 008 on Sensing Technology for : Damage Assessment of Sign Supports and Cantilever Poles between the University of Pittsburgh and the Pennsylvania De...

  10. Silicon nitride/silicon carbide composite powders

    DOEpatents

    Dunmead, Stephen D.; Weimer, Alan W.; Carroll, Daniel F.; Eisman, Glenn A.; Cochran, Gene A.; Susnitzky, David W.; Beaman, Donald R.; Nilsen, Kevin J.

    1996-06-11

    Prepare silicon nitride-silicon carbide composite powders by carbothermal reduction of crystalline silica powder, carbon powder and, optionally, crystalline silicon nitride powder. The crystalline silicon carbide portion of the composite powders has a mean number diameter less than about 700 nanometers and contains nitrogen. The composite powders may be used to prepare sintered ceramic bodies and self-reinforced silicon nitride ceramic bodies.

  11. Friction factors of colloidal suspension containing silicon dioxide nanoparticles in water

    NASA Astrophysics Data System (ADS)

    Tang, Clement; Pant, Sarbottam; Sharif, Md. Tanveer

    2015-11-01

    The purpose of this study is to experimentally characterize the friction factor of a colloidal suspension flow in circular and square tubes. The suspension contained silicon dioxide nanoparticles dispersed in distilled water at 9.58% volume concentration. Rheological measurements indicated that the suspension exhibits non-Newtonian behavior, and could be modelled as a power-law generalized Newtonian fluid. The experimental study showed that, with proper characterization of the consistency and flow behavior indices, the suspension flow friction factors in circular and square tubes exhibit similarities with those of Newtonian fluid flow. In the laminar fully-developed flow region, the Poiseuille numbers are similar to those established for Newtonian fluid flow. In the turbulent region, the Dodge and Metzner relation between the friction factor and a generalized Reynolds number can adequately describe the flow. The onsets of transition to turbulent flow for the suspension vary with the shape of the tube and differ from those of Newtonian fluid flow. The deviations suggest that the flow passage shape and the presence of nanoparticles affect the onset of transition to turbulent flow. Supported by North Dakota NASA EPSCoR.

  12. Thin silicon foils produced by epoxy-induced spalling of silicon for high efficiency solar cells

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Martini, R., E-mail: roberto.martini@imec.be; imec, Kapeldreef 75, 3001 Leuven; Kepa, J.

    2014-10-27

    We report on the drastic improvement of the quality of thin silicon foils produced by epoxy-induced spalling. In the past, researchers have proposed to fabricate silicon foils by spalling silicon substrates with different stress-inducing materials to manufacture thin silicon solar cells. However, the reported values of effective minority carrier lifetime of the fabricated foils remained always limited to ∼100 μs or below. In this work, we investigate epoxy-induced exfoliated foils by electron spin resonance to analyze the limiting factors of the minority carrier lifetime. These measurements highlight the presence of disordered dangling bonds and dislocation-like defects generated by the exfoliation process.more » A solution to remove these defects compatible with the process flow to fabricate solar cells is proposed. After etching off less than 1 μm of material, the lifetime of the foil increases by more than a factor of 4.5, reaching a value of 461 μs. This corresponds to a lower limit of the diffusion length of more than 7 times the foil thickness. Regions with different lifetime correlate well with the roughness of the crack surface which suggests that the lifetime is now limited by the quality of the passivation of rough surfaces. The reported values of the minority carrier lifetime show a potential for high efficiency (>22%) thin silicon solar cells.« less

  13. Gluing silicon with silicone

    NASA Astrophysics Data System (ADS)

    Abt, I.; Fox, H.; Moshous, B.; Richter, R. H.; Riechmann, K.; Rietz, M.; Riedl, J.; Denis, R. St; Wagner, W.

    1998-02-01

    Problems and solutions concerning the gluing of silicon detectors are discussed. The R & D work for the HERA- B vertex detector system led to gluing studies with epoxy and silicone-based adhesives used on ceramics and carbon fibre. The HERA- B solution using a silicone glue is presented.

  14. Peculiarities of the third natural frequency vibrations of a cantilever for the improvement of energy harvesting.

    PubMed

    Ostasevicius, Vytautas; Janusas, Giedrius; Milasauskaite, Ieva; Zilys, Mindaugas; Kizauskiene, Laura

    2015-05-28

    This paper focuses on several aspects extending the dynamical efficiency of a cantilever beam vibrating in the third mode. A few ways of producing this mode stimulation, namely vibro-impact or forced excitation, as well as its application for energy harvesting devices are proposed. The paper presents numerical and experimental analyses of novel structural dynamics effects along with an optimal configuration of the cantilever beam. The peculiarities of a cantilever beam vibrating in the third mode are related to the significant increase of the level of deformations capable of extracting significant additional amounts of energy compared to the conventional harvester vibrating in the first mode. Two types of a piezoelectric vibrating energy harvester (PVEH) prototype are analysed in this paper: the first one without electrode segmentation, while the second is segmented using electrode segmentation at the strain nodes of the third vibration mode to achieve effective operation at the third resonant frequency. The results of this research revealed that the voltage generated by any segment of the segmented PVEH prototype excited at the third resonant frequency demonstrated a 3.4-4.8-fold increase in comparison with the non-segmented prototype. Simultaneously, the efficiency of the energy harvester prototype also increased at lower resonant frequencies from 16% to 90%. The insights presented in the paper may serve for the development and fabrication of advanced piezoelectric energy harvesters which would be able to generate a considerably increased amount of electrical energy independently of the frequency of kinematical excitation.

  15. Determining shear modulus of thin wood composite materials using a cantilever beam vibration method

    Treesearch

    Cheng Guan; Houjiang Zhang; John F. Hunt; Haicheng Yan

    2016-01-01

    Shear modulus (G) of thin wood composite materials is one of several important indicators that characterizes mechanical properties. However, there is not an easy method to obtain this value. This study presents the use of a newly developed cantilever beam free vibration test apparatus to detect in-plane G of thin wood composite...

  16. Response of long, flexible cantilever beams applied root motions. [spacecraft structures

    NASA Technical Reports Server (NTRS)

    Fralich, R. W.

    1976-01-01

    Results are presented for an analysis of the response of long, flexible cantilever beams to applied root rotational accelerations. Maximum values of deformation, slope, bending moment, and shear are found as a function of magnitude and duration of acceleration input. Effects of tip mass and its eccentricity and rotatory inertia on the response are also investigated. It is shown that flexible beams can withstand large root accelerations provided the period of applied acceleration can be kept small relative to the beam fundamental period.

  17. Ultra-Thin Monocrystalline Silicon Solar Cell with 12.2% Efficiency Using Silicon-On-Insulator Substrate.

    PubMed

    Bian, Jian-Tao; Yu, Jian; Duan, Wei-Yuan; Qiu, Yu

    2015-04-01

    Single side heterojunction silicon solar cells were designed and fabricated using Silicon-On-Insulator (SOI) substrate. The TCAD software was used to simulate the effect of silicon layer thickness, doping concentration and the series resistance. A 10.5 µm thick monocrystalline silicon layer was epitaxially grown on the SOI with boron doping concentration of 2 x 10(16) cm(-3) by thermal CVD. Very high Voc of 678 mV was achieved by applying amorphous silicon heterojunction emitter on the front surface. The single cell efficiency of 12.2% was achieved without any light trapping structures. The rear surface recombination and the series resistance are the main limiting factors for the cell efficiency in addition to the c-Si thickness. By integrating an efficient light trapping scheme and further optimizing fabrication process, higher efficiency of 14.0% is expected for this type of cells. It can be applied to integrated circuits on a monolithic chip to meet the requirements of energy autonomous systems.

  18. DOE Office of Scientific and Technical Information (OSTI.GOV)

    Jeon, Sangmin; Desikan, Ramya; Thundat, Thomas George

    Young's equation, which is commonly used for determining the contact angle of liquid drops on a solid surface, ignores the vertical component of the surface energy. Although this force is extremely small and its effect on the solid can be ignored, it plays a significant role for flexible surfaces such as microcantilevers. A gold-coated silicon microcantilever and a dodecanethiol coated silicon microcantilever were used to detect real-time formation of nanobubbles on their surfaces when exposed to air-rich water. As air nanobubbles form on the surfaces of the cantilever, the cantilever undergoes bending, and we relate this to the vertical componentmore » of surface energy in Young's equation. This implies that the vertical component of the surface tension should be considered for flexible solid surfaces, and the formation of nanobubbles should be avoided when cantilevers are used as sensors to avoid artifacts.« less

  19. Porosity and thickness effect of porous silicon layer on photoluminescence spectra

    NASA Astrophysics Data System (ADS)

    Husairi, F. S.; Eswar, K. A.; Guliling, Muliyadi; Khusaimi, Z.; Rusop, M.; Abdullah, S.

    2018-05-01

    The porous silicon nanostructures was prepared by electrochemical etching of p-type silicon wafer. Porous silicon prepared by using different current density and fix etching time with assistance of halogen lamp. The physical structure of porous silicon measured by the parameters used which know as experimental factor. In this work, we select one of those factors to correlate which optical properties of porous silicon. We investigated the surface morphology by using Surface Profiler (SP) and photoluminescence using Photoluminescence (PL) spectrometer. Different physical characteristics of porous silicon produced when current density varied. Surface profiler used to measure the thickness of porous and the porosity calculated using mass different of silicon. Photoluminescence characteristics of porous silicon depend on their morphology because the size and distribution of pore its self will effect to their exciton energy level. At J=30 mA/cm2 the shorter wavelength produced and it followed the trend of porosity with current density applied.

  20. Output factor determination for dose measurements in axial and perpendicular planes using a silicon strip detector

    NASA Astrophysics Data System (ADS)

    Abou-Haïdar, Z.; Bocci, A.; Alvarez, M. A. G.; Espino, J. M.; Gallardo, M. I.; Cortés-Giraldo, M. A.; Ovejero, M. C.; Quesada, J. M.; Arráns, R.; Prieto, M. Ruiz; Vega-Leal, A. Pérez; Nieto, F. J. Pérez

    2012-04-01

    In this work we present the output factor measurements of a clinical linear accelerator using a silicon strip detector coupled to a new system for complex radiation therapy treatment verification. The objective of these measurements is to validate the system we built for treatment verification. The measurements were performed at the Virgin Macarena University Hospital in Seville. Irradiations were carried out with a Siemens ONCOR™ linac used to deliver radiotherapy treatment for cancer patients. The linac was operating in 6 MV photon mode; the different sizes of the fields were defined with the collimation system provided within the accelerator head. The output factor was measured with the silicon strip detector in two different layouts using two phantoms. In the first, the active area of the detector was placed perpendicular to the beam axis. In the second, the innovation consisted of a cylindrical phantom where the detector was placed in an axial plane with respect to the beam. The measured data were compared with data given by a commercial treatment planning system. Results were shown to be in a very good agreement between the compared set of data.

  1. Specific energy yield comparison between crystalline silicon and amorphous silicon based PV modules

    NASA Astrophysics Data System (ADS)

    Ferenczi, Toby; Stern, Omar; Hartung, Marianne; Mueggenburg, Eike; Lynass, Mark; Bernal, Eva; Mayer, Oliver; Zettl, Marcus

    2009-08-01

    As emerging thin-film PV technologies continue to penetrate the market and the number of utility scale installations substantially increase, detailed understanding of the performance of the various PV technologies becomes more important. An accurate database for each technology is essential for precise project planning, energy yield prediction and project financing. However recent publications showed that it is very difficult to get accurate and reliable performance data of theses technologies. This paper evaluates previously reported claims the amorphous silicon based PV modules have a higher annual energy yield compared to crystalline silicon modules relative to their rated performance. In order to acquire a detailed understanding of this effect, outdoor module tests were performed at GE Global Research Center in Munich. In this study we examine closely two of the five reported factors that contribute to enhanced energy yield of amorphous silicon modules. We find evidence to support each of these factors and evaluate their relative significance. We discuss aspects for improvement in how PV modules are sold and identify areas for further study further study.

  2. Nanoporous-Gold-Based Hybrid Cantilevered Actuator Dealloyed and Driven by A Modified Rotary Triboelectric Nanogenerator

    PubMed Central

    Li, Xuequan; Liu, Mengmeng; Huang, Baisheng; Liu, Hong; Hu, Weiguo; Shao, Li-Hua; Wang, Zhong Lin

    2016-01-01

    We firstly designed an electrochemical system for dealloying to synthesize nanoporous gold (NPG) and also driving the novel NPG based actuator by utilizing a modified rotary triboelectric nanogenerator (TENG). Compared to the previous reported TENG whose outputs decline due to temperature rising resulting from electrodes friction, the modified TENG with a cooling system has stable output current and voltage increased by 14% and 20%, respectively. The novel cantilevered hybrid actuator characterised by light-weight (ca. 3 mg) and small volume (ca. 30 mm × 2 mm × 10 μm) is driven by a microcontroller modulated TENG with the displacement of 2.2 mm, which is about 106 times larger than that of traditional cantilever using planar surfaces. The energy conversion efficiencies defined as the energy consumed during dealloying and actuation compared with the output of TENG are 47% and 56.7%, respectively. PMID:27063987

  3. Aeroelastic Flutter Behavior of a Cantilever and Elastically Mounted Plate within a Nozzle-Diffuser Geometry

    NASA Astrophysics Data System (ADS)

    Tosi, Luis Phillipe; Colonius, Tim; Lee, Hyeong Jae; Sherrit, Stewart; Jet Propulsion Laboratory Collaboration; California Institute of Technology Collaboration

    2016-11-01

    Aeroelastic flutter arises when the motion of a structure and its surrounding flowing fluid are coupled in a constructive manner, causing large amplitudes of vibration in the immersed solid. A cantilevered beam in axial flow within a nozzle-diffuser geometry exhibits interesting resonance behavior that presents good prospects for internal flow energy harvesting. Different modes can be excited as a function of throat velocity, nozzle geometry, fluid and cantilever material parameters. Similar behavior has been also observed in elastically mounted rigid plates, enabling new designs for such devices. This work explores the relationship between the aeroelastic flutter instability boundaries and relevant non-dimensional parameters via experiments, numerical, and stability analyses. Parameters explored consist of a non-dimensional stiffness, a non-dimensional mass, non-dimensional throat size, and Reynolds number. A map of the system response in this parameter space may serve as a guide to future work concerning possible electrical output and failure prediction in harvesting devices.

  4. Femtosecond laser fabricating black silicon in alkaline solution

    NASA Astrophysics Data System (ADS)

    Meng, Jiao; Song, Haiying; Li, Xiaoli; Liu, Shibing

    2015-03-01

    An efficient approach for enhancing the surface antireflection is proposed, in which a black silicon is fabricated by a femtosecond laser in alkaline solution. In the experiment, 2 wt% NaOH solution is formulated at room temperature (22 ± 1 °C). Then, a polished silicon is scanned via femtosecond laser irradiation in 2 wt% NaOH solution. Jungle-like microstructures on the black silicon surface are characterized using an atomic force microscopy. The reflectance of the black silicon is measured at the wavelengths ranging from 400 to 750 nm. Compared to the polished silicon, the black silicon can significantly suppress the optical reflection throughout the visible region (<5 %). Meanwhile, we also investigated the factors of the black silicon, including the femtosecond laser pulse energy and the scanning speed. This method is simple and effective to acquire the black silicon, which probably has a large advantage in fast and cost-effective black silicon fabrication.

  5. Nonlinear dynamic analysis of cantilevered piezoelectric energy harvesters under simultaneous parametric and external excitations

    NASA Astrophysics Data System (ADS)

    Fang, Fei; Xia, Guanghui; Wang, Jianguo

    2018-02-01

    The nonlinear dynamics of cantilevered piezoelectric beams is investigated under simultaneous parametric and external excitations. The beam is composed of a substrate and two piezoelectric layers and assumed as an Euler-Bernoulli model with inextensible deformation. A nonlinear distributed parameter model of cantilevered piezoelectric energy harvesters is proposed using the generalized Hamilton's principle. The proposed model includes geometric and inertia nonlinearity, but neglects the material nonlinearity. Using the Galerkin decomposition method and harmonic balance method, analytical expressions of the frequency-response curves are presented when the first bending mode of the beam plays a dominant role. Using these expressions, we investigate the effects of the damping, load resistance, electromechanical coupling, and excitation amplitude on the frequency-response curves. We also study the difference between the nonlinear lumped-parameter and distributed-parameter model for predicting the performance of the energy harvesting system. Only in the case of parametric excitation, we demonstrate that the energy harvesting system has an initiation excitation threshold below which no energy can be harvested. We also illustrate that the damping and load resistance affect the initiation excitation threshold.

  6. Nonlinear dynamic analysis of cantilevered piezoelectric energy harvesters under simultaneous parametric and external excitations

    NASA Astrophysics Data System (ADS)

    Fang, Fei; Xia, Guanghui; Wang, Jianguo

    2018-06-01

    The nonlinear dynamics of cantilevered piezoelectric beams is investigated under simultaneous parametric and external excitations. The beam is composed of a substrate and two piezoelectric layers and assumed as an Euler-Bernoulli model with inextensible deformation. A nonlinear distributed parameter model of cantilevered piezoelectric energy harvesters is proposed using the generalized Hamilton's principle. The proposed model includes geometric and inertia nonlinearity, but neglects the material nonlinearity. Using the Galerkin decomposition method and harmonic balance method, analytical expressions of the frequency-response curves are presented when the first bending mode of the beam plays a dominant role. Using these expressions, we investigate the effects of the damping, load resistance, electromechanical coupling, and excitation amplitude on the frequency-response curves. We also study the difference between the nonlinear lumped-parameter and distributed-parameter model for predicting the performance of the energy harvesting system. Only in the case of parametric excitation, we demonstrate that the energy harvesting system has an initiation excitation threshold below which no energy can be harvested. We also illustrate that the damping and load resistance affect the initiation excitation threshold.

  7. Operating characteristics of a cantilever-mounted resilient-pad gas-lubricated thrust bearing

    NASA Technical Reports Server (NTRS)

    Nemeth, Z. N.

    1979-01-01

    A resilient-pad gas thrust bearing consisting of pads mounted on cantilever beams was tested to determine its operating characteristic. The bearing was run at a thrust load of 74 newtons to a speed of 17000 rpm. The pad film thickness and bearing friction torque were measured and compared with theory. The measured film thickness was less than that predicted by theory. The bearing friction torque was greater than that predicted by theory.

  8. Mechanics of cantilever beam: Implementation and comparison of FEM and MLPG approach

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Trobec, Roman

    2016-06-08

    Two weak form solution approaches for partial differential equations, the well known meshbased finite element method and the newer meshless local Petrov Galerkin method are described and compared on a standard test case - mechanics of cantilever beam. The implementation, solution accuracy and calculation complexity are addressed for both approaches. We found out that FEM is superior in most standard criteria, but MLPG has some advantages because of its flexibility that results from its general formulation.

  9. Hall mobility in multicrystalline silicon

    NASA Astrophysics Data System (ADS)

    Schindler, F.; Geilker, J.; Kwapil, W.; Warta, W.; Schubert, M. C.

    2011-08-01

    Knowledge of the carrier mobility in silicon is of utmost importance for photovoltaic applications, as it directly influences the diffusion length and thereby the cell efficiency. Moreover, its value is needed for a correct quantitative evaluation of a variety of lifetime measurements. However, models that describe the carrier mobility in silicon are based on theoretical calculations or fits to experimental data in monocrystalline silicon. Multicrystalline (mc) silicon features crystal defects such as dislocations and grain boundaries, with the latter possibly leading to potential barriers through the trapping of charge carriers and thereby influencing the mobility, as shown, for example, by Maruska et al. [Appl. Phys. Lett. 36, 381 (1980)]. To quantify the mobilities in multicrystalline silicon, we performed Hall measurements in p-type mc-Si samples of various resistivities and different crystal structures and compared the data to majority carrier Hall mobilities in p-type monocrystalline floatzone (FZ) silicon. For lack of a model that provides reliable values of the Hall mobility in silicon, an empirical fit similar to existing models for conductivity mobilities is proposed based on Hall measurements of monocrystalline p-type FZ silicon. By comparing the measured Hall mobilities obtained from mc silicon with the corresponding Hall mobilities in monocrystalline silicon of the same resistivity, we found that the mobility reduction due to the presence of crystal defects in mc-Si ranges between 0% and 5% only. Mobility decreases of up to 30% as reported by Peter et al. [Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, 1-5 September 2008], or even of a factor of 2 to 3 as detected by Palais et al. [Mater. Sci. Eng. B 102, 184 (2003)], in multicrystalline silicon were not observed.

  10. An amorphous silicon photodiode microfluidic chip to detect nanomolar quantities of HIV-1 virion infectivity factor.

    PubMed

    Vistas, Cláudia R; Soares, Sandra S; Rodrigues, Rogério M M; Chu, Virginia; Conde, João P; Ferreira, Guilherme N M

    2014-08-07

    A hydrogenated amorphous silicon (a-Si:H) photosensor was explored for the quantitative detection of a HIV-1 virion infectivity factor (Vif) at a detection limit in the single nanomolar range. The a-Si:H photosensor was coupled with a microfluidic channel that was functionalized with a recombinant single chain variable fragment antibody. The biosensor selectively recognizes HIV-1 Vif from human cell extracts.

  11. Low cost silicon solar arrays

    NASA Technical Reports Server (NTRS)

    Ravi, K. V.; Serreze, H. B.; Bates, H. E.; Morrison, A. D.; Jewett, D. N.; Ho, J. C. T.; Schwuttke, G. H.; Ciszek, T. F.; Kran, A.

    1975-01-01

    Continuous growth methodology for silicon solar cell ribbons deals with capillary effects, die effects, thermal effects and crystal shape effects. Emphasis centers on the shape of the meniscus at the ribbon edge as a factor contributing to ribbon quality with respect to defect densities. Structural and electrical characteristics of edge defined, film-fed grown silicon ribbons are elaborated. Ribbon crystal solar cells produce AMO efficiencies of 6 to 10%.

  12. Method and apparatus for stable silicon dioxide layers on silicon grown in silicon nitride ambient

    NASA Technical Reports Server (NTRS)

    Cohen, R. A.; Wheeler, R. K. (Inventor)

    1974-01-01

    A method and apparatus for thermally growing stable silicon dioxide layers on silicon is disclosed. A previously etched and baked silicon nitride tube placed in a furnace is used to grow the silicon dioxide. First, pure oxygen is allowed to flow through the tube to initially coat the inside surface of the tube with a thin layer of silicon dioxide. After the tube is coated with the thin layer of silicon dioxide, the silicon is oxidized thermally in a normal fashion. If the tube becomes contaminated, the silicon dioxide is etched off thereby exposing clean silicon nitride and then the inside of the tube is recoated with silicon dioxide. As is disclosed, the silicon nitride tube can also be used as the ambient for the pyrolytic decomposition of silane and ammonia to form thin layers of clean silicon nitride.

  13. Nonharmonic oscillations of nanosized cantilevers due to quantum-size effects

    NASA Astrophysics Data System (ADS)

    Olsen, Martin; Gradin, Per; Lindefelt, Ulf; Olin, Håkan

    2010-02-01

    Using a one-dimensional jellium model and standard beam theory we calculate the spring constant of a vibrating nanowire cantilever. By using the asymptotic energy eigenvalues of the standing electron waves over the nanometer-sized cross-section area, the change in the grand canonical potential is calculated and hence the force and the spring constant. As the wire is bent more electron states fits in its cross section. This has an impact on the spring “constant” which oscillates slightly with the bending of the wire. In this way we obtain an amplitude-dependent resonance frequency of the oscillations that should be detectable.

  14. Frequency and deflection analysis of cenosphere/glass fiber interply hybrid composite cantilever beam

    NASA Astrophysics Data System (ADS)

    Bharath, J.; Joladarashi, Sharnappa; Biradar, Srikumar; Kumar, P. Naveen

    2018-04-01

    Interply hybrid laminates contain plies made of two or more different composite systems. Hybrid composites have unique features that can be used to meet specified design requirements in a more cost-effective way than nonhybrid composites. They offer many advantages over conventional composites including balanced strength and stiffness, enhanced bending and membrane mechanical properties, balanced thermal distortion stability, improved fatigue/impact resistance, improved fracture toughness and crack arresting properties, reduced weight and cost. In this paper an interply hybrid laminate composite containing Cenosphere reinforced polymer composite core and glass fiber reinforced polymer composite skin is analysied and effect of volume fraction of filler on frequency and load v/s deflection of hybrid composite are studied. Cenosphere reinforced polymer composite has increased specific strength, specific stiffness, specific density, savings in cost and weight. Glass fiber reinforced polymer composite has higher torsional rigidity when compared to metals. These laminate composites are fabricated to meet several structural applications and hence there is a need to study their vibration and deflection properties. Experimental investigation starts with fabrication of interply hybrid composite with cores of cenosphere reinforced epoxy composite volume fractions of CE 15, CE 25, CE15_UC as per ASTM E756-05C, and glasss fiber reinforced epoxy skin, cast product of required dimension by selecting glass fibre of proper thickness which is currently 0.25mm E-glass bidirectional woven glass fabric having density 2500kg/m3, in standard from cast parts of size 230mmX230mmX5mm in an Aluminum mould. Modal analysis of cantilever beam is performed to study the variation of natural frequency with strain gauge and the commercially available Lab-VIEW software and deflection in each of the cases by optical Laser Displacement Measurement Sensor to perform Load versus Deflection Analysis

  15. Studies of self-reciprocating characteristic of carbon nanotube film-based cantilevers under light and thermal radiation.

    PubMed

    Gong, Zhongcheng; Tseng, Yi-Hsuan; He, Yuan; Que, Long

    2012-01-01

    Self-reciprocating characteristic of carbon nanotube film (CNF)-Cu cantilevers upon exposure to light and thermal radiation was observed. This unique characteristic offers an attractive technical platform for harvesting solar and thermal energies on a single chip, which has been demonstrated recently. This paper reports the detailed experimental studies of this phenomenon. It reveals that the low-frequency self-reciprocation, sensitive to the thicknesses of CNF and Cu and the intensity of the light and thermal radiation, is mainly attributed to the electrostatic interaction among randomly connected carbon nanotubes (CNTs) in CNF. This is due to the fact that electrical currents in CNF induced by light and thermal radiation also exhibit an oscillating characteristic, similar to the self-reciprocating characteristic of the CNF-Cu cantilevers. The mechanism for this observed phenomenon is also discussed by relating the optical, thermal, electrical, elastic and mechanical properties of the CNF.

  16. A dynamic model of a cantilever beam with a closed, embedded horizontal crack including local flexibilities at crack tips

    NASA Astrophysics Data System (ADS)

    Liu, J.; Zhu, W. D.; Charalambides, P. G.; Shao, Y. M.; Xu, Y. F.; Fang, X. M.

    2016-11-01

    As one of major failure modes of mechanical structures subjected to periodic loads, embedded cracks due to fatigue can cause catastrophic failure of machineries. Understanding the dynamic characteristics of a structure with an embedded crack is helpful for early crack detection and diagnosis. In this work, a new three-segment beam model with local flexibilities at crack tips is developed to investigate the vibration of a cantilever beam with a closed, fully embedded horizontal crack, which is assumed to be not located at its clamped or free end or distributed near its top or bottom side. The three-segment beam model is assumed to be a linear elastic system, and it does not account for the nonlinear crack closure effect; the top and bottom segments always stay in contact at their interface during the beam vibration. It can model the effects of local deformations in the vicinity of the crack tips, which cannot be captured by previous methods in the literature. The middle segment of the beam containing the crack is modeled by a mechanically consistent, reduced bending moment. Each beam segment is assumed to be an Euler-Bernoulli beam, and the compliances at the crack tips are analytically determined using a J-integral approach and verified using commercial finite element software. Using compatibility conditions at the crack tips and the transfer matrix method, the nature frequencies and mode shapes of the cracked cantilever beam are obtained. The three-segment beam model is used to investigate the effects of local flexibilities at crack tips on the first three natural frequencies and mode shapes of the cracked cantilever beam. A stationary wavelet transform (SWT) method is used to process the mode shapes of the cracked cantilever beam; jumps in single-level SWT decomposition detail coefficients can be used to identify the length and location of an embedded horizontal crack.

  17. Peculiarities of the Third Natural Frequency Vibrations of a Cantilever for the Improvement of Energy Harvesting

    PubMed Central

    Ostasevicius, Vytautas; Janusas, Giedrius; Milasauskaite, Ieva; Zilys, Mindaugas; Kizauskiene, Laura

    2015-01-01

    This paper focuses on several aspects extending the dynamical efficiency of a cantilever beam vibrating in the third mode. A few ways of producing this mode stimulation, namely vibro-impact or forced excitation, as well as its application for energy harvesting devices are proposed. The paper presents numerical and experimental analyses of novel structural dynamics effects along with an optimal configuration of the cantilever beam. The peculiarities of a cantilever beam vibrating in the third mode are related to the significant increase of the level of deformations capable of extracting significant additional amounts of energy compared to the conventional harvester vibrating in the first mode. Two types of a piezoelectric vibrating energy harvester (PVEH) prototype are analysed in this paper: the first one without electrode segmentation, while the second is segmented using electrode segmentation at the strain nodes of the third vibration mode to achieve effective operation at the third resonant frequency. The results of this research revealed that the voltage generated by any segment of the segmented PVEH prototype excited at the third resonant frequency demonstrated a 3.4–4.8-fold increase in comparison with the non-segmented prototype. Simultaneously, the efficiency of the energy harvester prototype also increased at lower resonant frequencies from 16% to 90%. The insights presented in the paper may serve for the development and fabrication of advanced piezoelectric energy harvesters which would be able to generate a considerably increased amount of electrical energy independently of the frequency of kinematical excitation. PMID:26029948

  18. Evaluation of the split cantilever beam for Mode 3 delamination testing

    NASA Technical Reports Server (NTRS)

    Martin, Roderick H.

    1989-01-01

    A test rig for testing a thick split cantilever beam for scissoring delamination (mode 3) fracture toughness was developed. A 3-D finite element analysis was conducted on the test specimen to determine the strain energy release rate, G, distribution along the delamination front. The virtual crack closure technique was used to calculate the G components resulting from interlaminar tension, GI, interlaminar sliding shear, GII, and interlaminar tearing shear, GIII. The finite element analysis showed that at the delamination front no GI component existed, but a GII component was present in addition to a GIII component. Furthermore, near the free edges, the GII component was significantly higher than the GIII component. The GII/GIII ratio was found to increase with delamination length but was insensitive to the beam depth. The presence of GII at the delamination front was verified experimentally by examination of the failure surfaces. At the center of the beam, where the failure was in mode 3, there was significant fiber bridging. However, at the edges of the beam where the failure was in mode 3, there was no fiber bridging and mode 2 shear hackles were observed. Therefore, it was concluded that the split cantilever beam configuration does not represent a pure mode 3 test. The experimental work showed that the mode 2 fracture toughness, GIIc, must be less than the mode 3 fracture toughness, GIIIc. Therefore, a conservative approach to characterizing mode 3 delamination is to equate GIIIc to GIIc.

  19. Real-Time, Label-Free, All-Electrical Detection of Salmonella typhimurium Using Lead Zirconate Titanate/Gold-Coated Glass Cantilevers at any Relative Humidity

    PubMed Central

    Zhu, Qing; Shih, Wan Y.; Shih, Wei-Heng

    2007-01-01

    We have examined non-insulated PZT/gold-coated glass cantilevers for real-time, label-free detection of Salmonella t. by partial dipping at any relative humidity. The PZT/gold-coated glass cantilevers were consisted of a 0.127 mm thick PZT layer about 0.8 mm long, 2 mm wide bonded to a 0.15 mm thick gold-coated glass layer with a 3.0 mm long gold-coated glass tip for detection. We showed that by placing the water level at the nodal point, about 0.8 mm from the free end of the gold-glass tip, there was a 1-hr window in which the resonance frequency was stable despite the water level change by evaporation at 20% relative humidity or higher. By dipping the cantilevers to their nodal point, we were able to do real-time, label-free detection without background resonance frequency corrections at any relative humidity. The partially dipped PZT/gold-coated glass cantilever exhibited mass detection sensitivity, Δm/Δf = −5×10−11g/Hz, and a detection concentration sensitivity, 5×103 cells/ml in 2 ml of liquid, which was about two orders of magnitude lower than that of a 5 MHz QCM. It was also about two orders of magnitude lower than the infection dosage and one order of magnitude lower that the detection limit of a commercial Raptor sensor. PMID:22872784

  20. The Effects of Boron Doping on Residual Stress of Hfcvd Diamond Film for Mems Applications

    NASA Astrophysics Data System (ADS)

    Zhao, Tianqi; Wang, Xinchang; Sun, Fanghong

    In this study, the residual stress of boron-doped diamond (BDD) films is investigated as a function of boron doping level using X-ray diffraction (XRD) analysis. Boron doping level is controlled from 1000ppm to 9000ppm by dissolving trimethyl borate into acetone. BDD films are deposited on silicon wafers using a bias-enhanced hot filament chemical vapor deposition (BE-HFCVD) system. Residual stress calculated by sin2 ψ method varies linearly from -2.4GPa to -1.1GPa with increasing boron doping level. On the BDD film of -1.75GPa, free standing BDD cantilevers are fabricated by photolithography and ICP-RIE processes, then tested by laser Doppler vibrometer (LDV). A cantilever with resonant frequency of 183KHz and Q factor of 261 in the air is fabricated.

  1. Contact resonance atomic force microscopy imaging in air and water using photothermal excitation.

    PubMed

    Kocun, Marta; Labuda, Aleksander; Gannepalli, Anil; Proksch, Roger

    2015-08-01

    Contact Resonance Force Microscopy (CR-FM) is a leading atomic force microscopy technique for measuring viscoelastic nano-mechanical properties. Conventional piezo-excited CR-FM measurements have been limited to imaging in air, since the "forest of peaks" frequency response associated with acoustic excitation methods effectively masks the true cantilever resonance. Using photothermal excitation results in clean contact, resonance spectra that closely match the ideal frequency response of the cantilever, allowing unambiguous and simple resonance frequency and quality factor measurements in air and liquids alike. This extends the capabilities of CR-FM to biologically relevant and other soft samples in liquid environments. We demonstrate CR-FM in air and water on both stiff silicon/titanium samples and softer polystyrene-polyethylene-polypropylene polymer samples with the quantitative moduli having very good agreement between expected and measured values.

  2. Analysis and design of a cantilever-mounted resilient-pad gas-lubricated thrust bearing

    NASA Technical Reports Server (NTRS)

    Etsion, I.

    1976-01-01

    A thrust bearing consisting of pads mounted on resilient, metallic, cantilever beams is described and analyzed. Compliance and stiffness of the bearing assembly are discussed, and the effects of bearing design parameters on performance are shown. After the general analysis, a design example is presented for a flat sector-shaped gas bearing. A special case where zero axial movement of the runner can be obtained is pointed out.

  3. Roadmap on silicon photonics

    NASA Astrophysics Data System (ADS)

    Thomson, David; Zilkie, Aaron; Bowers, John E.; Komljenovic, Tin; Reed, Graham T.; Vivien, Laurent; Marris-Morini, Delphine; Cassan, Eric; Virot, Léopold; Fédéli, Jean-Marc; Hartmann, Jean-Michel; Schmid, Jens H.; Xu, Dan-Xia; Boeuf, Frédéric; O'Brien, Peter; Mashanovich, Goran Z.; Nedeljkovic, M.

    2016-07-01

    Silicon photonics research can be dated back to the 1980s. However, the previous decade has witnessed an explosive growth in the field. Silicon photonics is a disruptive technology that is poised to revolutionize a number of application areas, for example, data centers, high-performance computing and sensing. The key driving force behind silicon photonics is the ability to use CMOS-like fabrication resulting in high-volume production at low cost. This is a key enabling factor for bringing photonics to a range of technology areas where the costs of implementation using traditional photonic elements such as those used for the telecommunications industry would be prohibitive. Silicon does however have a number of shortcomings as a photonic material. In its basic form it is not an ideal material in which to produce light sources, optical modulators or photodetectors for example. A wealth of research effort from both academia and industry in recent years has fueled the demonstration of multiple solutions to these and other problems, and as time progresses new approaches are increasingly being conceived. It is clear that silicon photonics has a bright future. However, with a growing number of approaches available, what will the silicon photonic integrated circuit of the future look like? This roadmap on silicon photonics delves into the different technology and application areas of the field giving an insight into the state-of-the-art as well as current and future challenges faced by researchers worldwide. Contributions authored by experts from both industry and academia provide an overview and outlook for the silicon waveguide platform, optical sources, optical modulators, photodetectors, integration approaches, packaging, applications of silicon photonics and approaches required to satisfy applications at mid-infrared wavelengths. Advances in science and technology required to meet challenges faced by the field in each of these areas are also addressed together with

  4. Ytterbium-doped fibre laser Q-switched by a cantilever-type micro-mirror.

    PubMed

    Fabert, Marc; Desfarges-Berthelemot, Agnès; Kermène, Vincent; Crunteanu, Aurelian; Bouyge, David; Blondy, Pierre

    2008-12-22

    We present an Ytterbium fibre laser operating in the Q-switch regime by using a Micro- Opto- Electro- Mechanical System (MOEMS) of novel design. The cantilever-type micro-mirror is designed to generate short laser pulses with duration between 20 ns and 100 ns at repetition rates ranging from a few kilohertz up to 800 kHz. The bent profile of this new type of MOEMS ensures a high modulation rate of the laser cavity losses while keeping a high actuating frequency.

  5. Non-contact AFM measurement of the Hamaker constants of solids: Calibrating cantilever geometries.

    PubMed

    Fronczak, Sean G; Browne, Christopher A; Krenek, Elizabeth C; Beaudoin, Stephen P; Corti, David S

    2018-05-01

    Surface effects arising from roughness and deformation can negatively affect the results of AFM contact experiments. Using the non-contact portion of an AFM deflection curve is therefore desirable for estimating the Hamaker constant, A, of a solid material. A previously validated non-contact quasi-dynamic method for estimating A is revisited, in which the cantilever tip is now always represented by an "effective sphere". In addition to simplifying this previous method, accurate estimates of A can still be obtained even though precise knowledge of the nanoscale geometric features of the cantilever tip are no longer required. The tip's "effective" radius of curvature, R eff , is determined from a "calibration" step, in which the tip's deflection at first contact with the surface is measured for a substrate with a known Hamaker constant. After R eff is known for a given tip, estimates of A for other surfaces of interest are then determined. An experimental study was conducted to validate the new method and the obtained results are in good agreement with predictions from the Lifshitz approximation, when available. Since R eff accounts for all geometric uncertainties of the tip through a single fitted parameter, no visual fitting of the tip shape was required. Copyright © 2018 Elsevier Inc. All rights reserved.

  6. Insulated Conducting Cantilevered Nanotips and Two-Chamber Recording System for High Resolution Ion Sensing AFM

    PubMed Central

    Meckes, Brian; Arce, Fernando Teran; Connelly, Laura S.; Lal, Ratnesh

    2014-01-01

    Biological membranes contain ion channels, which are nanoscale pores allowing controlled ionic transport and mediating key biological functions underlying normal/abnormal living. Synthetic membranes with defined pores are being developed to control various processes, including filtration of pollutants, charge transport for energy storage, and separation of fluids and molecules. Although ionic transport (currents) can be measured with single channel resolution, imaging their structure and ionic currents simultaneously is difficult. Atomic force microscopy enables high resolution imaging of nanoscale structures and can be modified to measure ionic currents simultaneously. Moreover, the ionic currents can also be used to image structures. A simple method for fabricating conducting AFM cantilevers to image pore structures at high resolution is reported. Tungsten microwires with nanoscale tips are insulated except at the apex. This allows simultaneous imaging via cantilever deflections in normal AFM force feedback mode as well as measuring localized ionic currents. These novel probes measure ionic currents as small as picoampere while providing nanoscale spatial resolution surface topography and is suitable for measuring ionic currents and conductance of biological ion channels. PMID:24663394

  7. Silicon surface passivation by silicon nitride deposition

    NASA Technical Reports Server (NTRS)

    Olsen, L. C.

    1984-01-01

    Silicon nitride deposition was studied as a method of passivation for silicon solar cell surfaces. The following three objectives were the thrust of the research: (1) the use of pecvd silicon nitride for passivation of silicon surfaces; (2) measurement techniques for surface recombination velocity; and (3) the importance of surface passivation to high efficiency solar cells.

  8. Nonlinear motion of cantilevered SWNT and Its Meaning to Phonon Dynamics

    NASA Astrophysics Data System (ADS)

    Koh, Heeyuen; Cannon, James; Chiashi, Shohei; Shiomi, Junichiro; Maruyama, Shigeo

    2013-03-01

    Based on the finding that the lowest frequency mode of cantilevered SWNT is described by the continuum beam theory in frequency domain, we considered its effect of the symmetric structure for the coupling of orthogonal transverse modes to explain the nonlinear motion of free thermal vibration. This nonlinear motion calculated by our molecular dynamics simulation, once regarded as noise, is observed to have the periodic order with duffing and beating, which is dependent on aspect ratio and temperature. It could be dictated by the governing equation from the Green Lagrangian strain tensor. The nonlinear beam equation from strain tensor described the motion well for various models which has different aspect ratio in molecular dynamics simulation. Since this motion is nothing but the interaction between 2nd mode of radial, tangential mode and 1st longitudinal mode, it was found that Green Lagrangian strain tensor is capable to deal such coupling. The free thermal motion of suspended SWNT is also considered without temperature gradient. The Q factor measured by this theoretical analysis will be discussed. Part of this work was financially supported by Grant-in-Aid for Scientific Research (19054003 and 22226006), and Global COE Program 'Global Center for Excellence for Mechanical Systems Innovation'

  9. Bandwidth increasing mechanism by introducing a curve fixture to the cantilever generator

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Liu, Weiqun, E-mail: weiqunliu@home.swjtu.edu.cn; Liu, Congzhi; Ren, Bingyu

    2016-07-25

    A nonlinear wideband generator architecture by clamping the cantilever beam generator with a curve fixture is proposed. Devices with different nonlinear stiffness can be obtained by properly choosing the fixture curve according to the design requirements. Three available generator types are presented and discussed for polynomial curves. Experimental investigations show that the proposed mechanism effectively extends the operation bandwidth with good power performance. Especially, the simplicity and easy feasibility allow the mechanism to be widely applied for vibration generators in different scales and environments.

  10. Membrane transfer of crystalline silicon thin film solar cells

    NASA Astrophysics Data System (ADS)

    Vempati, Venkata Kesari Nandan

    Silicon has been dominating the solar industry for many years and has been touted as the gold standard of the photovoltaic world. The factors for its dominance: government subsidies and ease of processing. Silicon holds close to 90% of the market share in the material being used for solar cell production. Of which 14% belongs to single-crystalline Silicon. Although 24% efficient bulk crystalline solar cells have been reported, the industry has been looking for thin film alternatives to reduce the cost of production. Moreover with the new avenues like flexible consumer electronics opening up, there is a need to introduce the flexibility into the solar cells. Thin film films make up for their inefficiency keeping their mechanical properties intact by incorporating Anti-reflective schemes such as surface texturing, textured back reflectors and low reflective surfaces. This thesis investigates the possibility of using thin film crystalline Silicon for fabricating solar cells and has demonstrated a low cost and energy efficient way for fabricating 2microm thick single crystalline Silicon solar cells with an efficiency of 0.8% and fill factor of 35%.

  11. Fabrication and energy harvesting characteristics of unimorph piezoelectric cantilever generators with interdigitated electrode lead zirconate titanate laminates

    NASA Astrophysics Data System (ADS)

    Lee, Min-seon; Yun, Ji-sun; Park, Woon-ik; Hong, Youn-woo; Cho, Jeong-ho; Paik, Jong-hoo; Park, Yong Ho; Son, Chun-myung; Jeong, Young Hun

    2017-12-01

    Interdigitated electrode (IDE) unimorph piezoelectric cantilever generators (UPCGs) were fabricated and their energy harvesting characteristics were investigated. A hard lead zirconate titanate (PZT) material with a high mechanical quality factor (Q m) of 1280 was used for the active piezoelectric film of the IDE UPCGs. Two different laminated IDE UPCGs were prepared; one has Ag/Pd interdigitated electrode (IDE) formed only on the top and bottom PZT sheets (D-IDE), while the other has Ag/Pd IDE on all of the PZT sheets (M-IDE). Cofiring was conducted at 1050 °C for 2 h for PZT laminates with IDEs. The fabricated IDE UPCGs exhibited power densities of 50.4 µW/cm3 for the D-IDE and 820 µW/cm3 for the M-IDE. The UPCG with the M-IDE exhibited a higher performance than that with the D-IDE. Specifically, a significantly enhanced normalized power factor of 670 µW/(g2·cm3) was found at 118 Hz across 100 kΩ.

  12. Method for producing silicon nitride/silicon carbide composite

    DOEpatents

    Dunmead, Stephen D.; Weimer, Alan W.; Carroll, Daniel F.; Eisman, Glenn A.; Cochran, Gene A.; Susnitzky, David W.; Beaman, Donald R.; Nilsen, Kevin J.

    1996-07-23

    Silicon carbide/silicon nitride composites are prepared by carbothermal reduction of crystalline silica powder, carbon powder and optionally crsytalline silicon nitride powder. The crystalline silicon carbide portion of the composite has a mean number diameter less than about 700 nanometers and contains nitrogen.

  13. MEMS piezoresistive cantilever for the direct measurement of cardiomyocyte contractile force

    NASA Astrophysics Data System (ADS)

    Matsudaira, Kenei; Nguyen, Thanh-Vinh; Hirayama Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

    2017-10-01

    This paper reports on a method to directly measure the contractile forces of cardiomyocytes using MEMS (micro electro mechanical systems)-based force sensors. The fabricated sensor chip consists of piezoresistive cantilevers that can measure contractile forces with high frequency (several tens of kHz) and high sensing resolution (less than 0.1 nN). Moreover, the proposed method does not require a complex observation system or image processing, which are necessary in conventional optical-based methods. This paper describes the design, fabrication, and evaluation of the proposed device and demonstrates the direct measurements of contractile forces of cardiomyocytes using the fabricated device.

  14. Silicone metalization

    DOEpatents

    Maghribi, Mariam N [Livermore, CA; Krulevitch, Peter [Pleasanton, CA; Hamilton, Julie [Tracy, CA

    2006-12-05

    A system for providing metal features on silicone comprising providing a silicone layer on a matrix and providing a metal layer on the silicone layer. An electronic apparatus can be produced by the system. The electronic apparatus comprises a silicone body and metal features on the silicone body that provide an electronic device.

  15. Silicone metalization

    DOEpatents

    Maghribi, Mariam N.; Krulevitch, Peter; Hamilton, Julie

    2008-12-09

    A system for providing metal features on silicone comprising providing a silicone layer on a matrix and providing a metal layer on the silicone layer. An electronic apparatus can be produced by the system. The electronic apparatus comprises a silicone body and metal features on the silicone body that provide an electronic device.

  16. Formation of porous silicon oxide from substrate-bound silicon rich silicon oxide layers by continuous-wave laser irradiation

    NASA Astrophysics Data System (ADS)

    Wang, Nan; Fricke-Begemann, Th.; Peretzki, P.; Ihlemann, J.; Seibt, M.

    2018-03-01

    Silicon nanocrystals embedded in silicon oxide that show room temperature photoluminescence (PL) have great potential in silicon light emission applications. Nanocrystalline silicon particle formation by laser irradiation has the unique advantage of spatially controlled heating, which is compatible with modern silicon micro-fabrication technology. In this paper, we employ continuous wave laser irradiation to decompose substrate-bound silicon-rich silicon oxide films into crystalline silicon particles and silicon dioxide. The resulting microstructure is studied using transmission electron microscopy techniques with considerable emphasis on the formation and properties of laser damaged regions which typically quench room temperature PL from the nanoparticles. It is shown that such regions consist of an amorphous matrix with a composition similar to silicon dioxide which contains some nanometric silicon particles in addition to pores. A mechanism referred to as "selective silicon ablation" is proposed which consistently explains the experimental observations. Implications for the damage-free laser decomposition of silicon-rich silicon oxides and also for controlled production of porous silicon dioxide films are discussed.

  17. Three dimensional quantitative characterization of magnetite nanoparticles embedded in mesoporous silicon: local curvature, demagnetizing factors and magnetic Monte Carlo simulations.

    PubMed

    Uusimäki, Toni; Margaris, Georgios; Trohidou, Kalliopi; Granitzer, Petra; Rumpf, Klemens; Sezen, Meltem; Kothleitner, Gerald

    2013-12-07

    Magnetite nanoparticles embedded within the pores of a mesoporous silicon template have been characterized using electron tomography. Linear least squares optimization was used to fit an arbitrary ellipsoid to each segmented particle from the three dimensional reconstruction. It was then possible to calculate the demagnetizing factors and the direction of the shape anisotropy easy axis for every particle. The demagnetizing factors, along with the knowledge of spatial and volume distribution of the superparamagnetic nanoparticles, were used as a model for magnetic Monte Carlo simulations, yielding zero field cooling/field cooling and magnetic hysteresis curves, which were compared to the measured ones. Additionally, the local curvature of the magnetite particles' docking site within the mesoporous silicon's surface was obtained in two different ways and a comparison will be given. A new iterative semi-automatic image alignment program was written and the importance of image segmentation for a truly objective analysis is also addressed.

  18. Robust energy harvesting from walking vibrations by means of nonlinear cantilever beams

    NASA Astrophysics Data System (ADS)

    Kluger, Jocelyn M.; Sapsis, Themistoklis P.; Slocum, Alexander H.

    2015-04-01

    In the present work we examine how mechanical nonlinearity can be appropriately utilized to achieve strong robustness of performance in an energy harvesting setting. More specifically, for energy harvesting applications, a great challenge is the uncertain character of the excitation. The combination of this uncertainty with the narrow range of good performance for linear oscillators creates the need for more robust designs that adapt to a wider range of excitation signals. A typical application of this kind is energy harvesting from walking vibrations. Depending on the particular characteristics of the person that walks as well as on the pace of walking, the excitation signal obtains completely different forms. In the present work we study a nonlinear spring mechanism that is composed of a cantilever wrapping around a curved surface as it deflects. While for the free cantilever, the force acting on the free tip depends linearly on the tip displacement, the utilization of a contact surface with the appropriate distribution of curvature leads to essentially nonlinear dependence between the tip displacement and the acting force. The studied nonlinear mechanism has favorable mechanical properties such as low frictional losses, minimal moving parts, and a rugged design that can withstand excessive loads. Through numerical simulations we illustrate that by utilizing this essentially nonlinear element in a 2 degrees-of-freedom (DOF) system, we obtain strongly nonlinear energy transfers between the modes of the system. We illustrate that this nonlinear behavior is associated with strong robustness over three radically different excitation signals that correspond to different walking paces. To validate the strong robustness properties of the 2DOF nonlinear system, we perform a direct parameter optimization for 1DOF and 2DOF linear systems as well as for a class of 1DOF and 2DOF systems with nonlinear springs similar to that of the cubic spring that are physically realized

  19. RF performances of inductors integrated on localized p+-type porous silicon regions

    PubMed Central

    2012-01-01

    To study the influence of localized porous silicon regions on radiofrequency performances of passive devices, inductors were integrated on localized porous silicon regions, full porous silicon sheet, bulk silicon and glass substrates. In this work, a novel strong, resistant fluoropolymer mask is introduced to localize the porous silicon on the silicon wafer. Then, the quality factors and resonant frequencies obtained with the different substrates are presented. A first comparison is done between the performances of inductors integrated on same-thickness localized and full porous silicon sheet layers. The effect of the silicon regions in the decrease of performances of localized porous silicon is discussed. Then, the study shows that the localized porous silicon substrate significantly reduces losses in comparison with high-resistivity silicon or highly doped silicon bulks. These results are promising for the integration of both passive and active devices on the same silicon/porous silicon hybrid substrate. PMID:23009746

  20. Periodic silicon nanostructures for spectroscopic microsensors

    NASA Astrophysics Data System (ADS)

    Wehrspohn, Ralf B.; Gesemann, Benjamin; Pergande, Daniel; Geppert, Torsten M.; Schweizer, Stefan L.; Moretton, Susanne; Lambrecht, Armin

    2011-09-01

    Periodic silicon nanostructures can be used for different kinds of gas sensors depending on the analyte concentration. First we present an optical gas sensor based on the classical non-dispersive infrared technique for ppm-concentration using ultra-compact photonic crystal gas cells. It is conceptually based on low group velocities inside a photonic crystal gas cell and anti-reflection layers coupling light into the device. Experimentally, an enhancement of the CO2 infrared absorption by a factor of 2.6 to 3.5 as compared to an empty cell, due to slow light inside a 2D silicon photonic crystal gas cell, was observed; this is in excellent agreement with numerical simulations. In addition we report on silicon nanotip arrays, suitable for gas ionization in ion mobility microspectrometers (micro-IMS) having detection ranges in principle down to the ppt-range. Such instruments allow the detection of explosives, chemical warfare agents, and illicit drugs, e.g., at airports. We describe the fabrication process of large-scale-ordered nanotips with different tip shapes. Both silicon microstructures have been fabricated by photoelectrochemical etching of silicon.

  1. Silicon Micro- and Nanofabrication for Medicine

    PubMed Central

    Fine, Daniel; Goodall, Randy; Bansal, Shyam S.; Chiappini, Ciro; Hosali, Sharath; van de Ven, Anne L.; Srinivasan, Srimeenkashi; Liu, Xuewu; Godin, Biana; Brousseau, Louis; Yazdi, Iman K.; Fernandez-Moure, Joseph; Tasciotti, Ennio; Wu, Hung-Jen; Hu, Ye; Klemm, Steve; Ferrari, Mauro

    2013-01-01

    This manuscript constitutes a review of several innovative biomedical technologies fabricated using the precision and accuracy of silicon micro- and nanofabrication. The technologies to be reviewed are subcutaneous nanochannel drug delivery implants for the continuous tunable zero-order release of therapeutics, multi-stage logic embedded vectors for the targeted systemic distribution of both therapeutic and imaging contrast agents, silicon and porous silicon nanowires for investigating cellular interactions and processes as well as for molecular and drug delivery applications, porous silicon (pSi) as inclusions into biocomposites for tissue engineering, especially as it applies to bone repair and regrowth, and porous silica chips for proteomic profiling. In the case of the biocomposites, the specifically designed pSi inclusions not only add to the structural robustness, but can also promote tissue and bone regrowth, fight infection, and reduce pain by releasing stimulating factors and other therapeutic agents stored within their porous network. The common material thread throughout all of these constructs, silicon and its associated dielectrics (silicon dioxide, silicon nitride, etc.), can be precisely and accurately machined using the same scalable micro- and nanofabrication protocols that are ubiquitous within the semiconductor industry. These techniques lend themselves to the high throughput production of exquisitely defined and monodispersed nanoscale features that should eliminate architectural randomness as a source of experimental variation thereby potentially leading to more rapid clinical translation. PMID:23584841

  2. Aeroelastic oscillations of a cantilever with structural nonlinearities: theory and numerical simulation.

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Robinson, Brandon; Rocha da Costa, Leandro Jose; Poirel, Dominique

    Our study details the derivation of the nonlinear equations of motion for the axial, biaxial bending and torsional vibrations of an aeroelastic cantilever undergoing rigid body (pitch) rotation at the base. The primary attenstion is focussed on the geometric nonlinearities of the system, whereby the aeroelastic load is modeled by the theory of linear quasisteady aerodynamics. This modelling effort is intended to mimic the wind-tunnel experimental setup at the Royal Military College of Canada. While the derivation closely follows the work of Hodges and Dowell [1] for rotor blades, this aeroelastic system contains new inertial terms which stem from themore » fundamentally different kinematics than those exhibited by helicopter or wind turbine blades. Using the Hamilton’s principle, a set of coupled nonlinear partial differential equations (PDEs) and an ordinary differential equation (ODE) are derived which describes the coupled axial-bending-bending-torsion-pitch motion of the aeroelastic cantilever with the pitch rotation. The finite dimensional approximation of the coupled system of PDEs are obtained using the Galerkin projection, leading to a coupled system of ODEs. Subsequently, these nonlinear ODEs are solved numerically using the built-in MATLAB implicit ODE solver and the associated numerical results are compared with those obtained using Houbolt’s method. It is demonstrated that the system undergoes coalescence flutter, leading to a limit cycle oscillation (LCO) due to coupling between the rigid body pitching mode and teh flexible mode arising from the flapwise bending motion.« less

  3. Weakly modulated silicon-dioxide-cladding gratings for silicon waveguide Fabry-Pérot cavities.

    PubMed

    Grote, Richard R; Driscoll, Jeffrey B; Biris, Claudiu G; Panoiu, Nicolae C; Osgood, Richard M

    2011-12-19

    We show by theory and experiment that silicon-dioxide-cladding gratings for Fabry-Pérot cavities on silicon-on-insulator channel ("wire") waveguides provide a low-refractive-index perturbation, which is required for several important integrated photonics components. The underlying refractive index perturbation of these gratings is significantly weaker than that of analogous silicon gratings, leading to finer control of the coupling coefficient κ. Our Fabry-Pérot cavities are designed using the transfer-matrix method (TMM) in conjunction with the finite element method (FEM) for calculating the effective index of each waveguide section. Device parameters such as coupling coefficient, κ, Bragg mirror stop band, Bragg mirror reflectivity, and quality factor Q are examined via TMM modeling. Devices are fabricated with representative values of distributed Bragg reflector lengths, cavity lengths, and propagation losses. The measured transmission spectra show excellent agreement with the FEM/TMM calculations.

  4. Contact resonance atomic force microscopy imaging in air and water using photothermal excitation

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Kocun, Marta; Labuda, Aleksander; Gannepalli, Anil

    2015-08-15

    Contact Resonance Force Microscopy (CR-FM) is a leading atomic force microscopy technique for measuring viscoelastic nano-mechanical properties. Conventional piezo-excited CR-FM measurements have been limited to imaging in air, since the “forest of peaks” frequency response associated with acoustic excitation methods effectively masks the true cantilever resonance. Using photothermal excitation results in clean contact, resonance spectra that closely match the ideal frequency response of the cantilever, allowing unambiguous and simple resonance frequency and quality factor measurements in air and liquids alike. This extends the capabilities of CR-FM to biologically relevant and other soft samples in liquid environments. We demonstrate CR-FM inmore » air and water on both stiff silicon/titanium samples and softer polystyrene-polyethylene-polypropylene polymer samples with the quantitative moduli having very good agreement between expected and measured values.« less

  5. Improved process for forming a three-dimensional undersurface on a printed cantilever

    NASA Astrophysics Data System (ADS)

    Kanazawa, Shusuke; Kusaka, Yasuyuki; Yamamoto, Noritaka; Ushijima, Hirobumi

    2018-05-01

    An improvement in the lift-on offset printing process is reported as a means of enabling the structural customization of hollow structures used as moving parts of sensors and actuators. The improved process can add structures to the underside of a hollow structure by modifying the preparation of the pre-structure. As a demonstration, the mechanical displacement of a cantilever in a gravitational acceleration sensor was enhanced by the addition of a proof mass. The improved process can be expected to further produce functionalized hollow structures by an efficient manufacturing process.

  6. Design and Implementation of a Micromechanical Silicon Resonant Accelerometer

    PubMed Central

    Huang, Libin; Yang, Hui; Gao, Yang; Zhao, Liye; Liang, Jinxing

    2013-01-01

    The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic range, anti-interference capacity and good stability. Because of the mismatching thermal expansion coefficients of silicon and glass, the micromechanical silicon resonant accelerometer based on the Silicon on Glass (SOG) technique is deeply affected by the temperature during the fabrication, packaging and use processes. The thermal stress caused by temperature changes directly affects the frequency output of the accelerometer. Based on the working principle of the micromechanical resonant accelerometer, a special accelerometer structure that reduces the temperature influence on the accelerometer is designed. The accelerometer can greatly reduce the thermal stress caused by high temperatures in the process of fabrication and packaging. Currently, the closed-loop drive circuit is devised based on a phase-locked loop. The unloaded resonant frequencies of the prototype of the micromechanical silicon resonant accelerometer are approximately 31.4 kHz and 31.5 kHz. The scale factor is 66.24003 Hz/g. The scale factor stability is 14.886 ppm, the scale factor repeatability is 23 ppm, the bias stability is 23 μg, the bias repeatability is 170 μg, and the bias temperature coefficient is 0.0734 Hz/°C. PMID:24256978

  7. Design and implementation of a micromechanical silicon resonant accelerometer.

    PubMed

    Huang, Libin; Yang, Hui; Gao, Yang; Zhao, Liye; Liang, Jinxing

    2013-11-19

    The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic range, anti-interference capacity and good stability. Because of the mismatching thermal expansion coefficients of silicon and glass, the micromechanical silicon resonant accelerometer based on the Silicon on Glass (SOG) technique is deeply affected by the temperature during the fabrication, packaging and use processes. The thermal stress caused by temperature changes directly affects the frequency output of the accelerometer. Based on the working principle of the micromechanical resonant accelerometer, a special accelerometer structure that reduces the temperature influence on the accelerometer is designed. The accelerometer can greatly reduce the thermal stress caused by high temperatures in the process of fabrication and packaging. Currently, the closed-loop drive circuit is devised based on a phase-locked loop. The unloaded resonant frequencies of the prototype of the micromechanical silicon resonant accelerometer are approximately 31.4 kHz and 31.5 kHz. The scale factor is 66.24003 Hz/g. The scale factor stability is 14.886 ppm, the scale factor repeatability is 23 ppm, the bias stability is 23 μg, the bias repeatability is 170 μg, and the bias temperature coefficient is 0.0734 Hz/°C.

  8. Probing Mechanics of Crumpled Two-Dimensional Membranes and Cantilevers

    NASA Astrophysics Data System (ADS)

    Nicholl, Ryan; Conley, Hiram; Lavrik, Nickolay; Vlassiouk, Ivan; Puzyrev, Yevgeniy; Sreenivas, Vijayashree Parsi; Pantelides, Sokrates; Bolotin, Kirill

    Two-dimensional materials (2DMs) are inevitably crumpled in the out-of-plane direction due to both static wrinkling associated with uneven stresses and dynamic wrinkling resulting from flexural phonons. Here, we investigate the effect of this crumpling on mechanical properties of 2DMs - in-plane stiffness and bending rigidity. To carry out these measurements, we developed techniques to fabricate graphene membranes and singly clamped graphene cantilevers that are stable in vacuum and air. The measurements are performed by actuating these devices electrostatically and monitoring their displacement via sensitive interferometric profilometry both at room and low temperatures. We find that crumpling lowers the in-plane stiffness and strongly increases the bending rigidity of 2DMs. Furthermore, we unravel the relative contribution of static and dynamic wrinkling to observed renormalization of the effective mechanical constants.

  9. Flexural Vibration Test of a Cantilever Beam with a Force Sensor: Fast Determination of Young's Modulus

    ERIC Educational Resources Information Center

    Digilov, Rafael M.

    2008-01-01

    We describe a simple and very inexpensive undergraduate laboratory experiment for fast determination of Young's modulus at moderate temperatures with the aid of a force sensor. A strip-shaped specimen rigidly bolted to the force sensor forms a clamped-free cantilever beam. Placed in a furnace, it is subjected to free-bending vibrations followed by…

  10. Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

    NASA Astrophysics Data System (ADS)

    Liu, Ruiwen; Jiao, Binbin; Kong, Yanmei; Li, Zhigang; Shang, Haiping; Lu, Dike; Gao, Chaoqun; Chen, Dapeng

    2013-09-01

    Micro-devices with a bi-material-cantilever (BMC) commonly suffer initial curvature due to the mismatch of residual stress. Traditional corrective methods to reduce the residual stress mismatch generally involve the development of different material deposition recipes. In this paper, a new method for reducing residual stress mismatch in a BMC is proposed based on various previously developed deposition recipes. An initial material film is deposited using two or more developed deposition recipes. This first film is designed to introduce a stepped stress gradient, which is then balanced by overlapping a second material film on the first and using appropriate deposition recipes to form a nearly stress-balanced structure. A theoretical model is proposed based on both the moment balance principle and total equal strain at the interface of two adjacent layers. Experimental results and analytical models suggest that the proposed method is effective in producing multi-layer micro cantilevers that display balanced residual stresses. The method provides a generic solution to the problem of mismatched initial stresses which universally exists in micro-electro-mechanical systems (MEMS) devices based on a BMC. Moreover, the method can be incorporated into a MEMS design automation package for efficient design of various multiple material layer devices from MEMS material library and developed deposition recipes.

  11. Factors affecting alcohol-water pervaporation performance of hydrophobic zeolite-silicone rubber mixed matrix membranes

    EPA Science Inventory

    Mixed matrix membranes (MMMs) consisting of ZSM-5 zeolite particles dispersed in silicone rubber exhibited ethanol-water pervaporation permselectivities up to 5 times that of silicone rubber alone and 3 times higher than simple vapor-liquid equilibrium (VLE). A number of conditi...

  12. Optomechanical study and optimization of cantilever plate dynamics

    NASA Astrophysics Data System (ADS)

    Furlong, Cosme; Pryputniewicz, Ryszard J.

    1995-06-01

    Optimum dynamic characteristics of an aluminum cantilever plate containing holes of different sizes and located at arbitrary positions on the plate are studied computationally and experimentally. The objective function of this optimization is the minimization/maximization of the natural frequencies of the plate in terms of such design variable s as the sizes and locations of the holes. The optimization process is performed using the finite element method and mathematical programming techniques in order to obtain the natural frequencies and the optimum conditions of the plate, respectively. The modal behavior of the resultant optimal plate layout is studied experimentally through the use of holographic interferometry techniques. Comparisons of the computational and experimental results show that good agreement between theory and test is obtained. The comparisons also show that the combined, or hybrid use of experimental and computational techniques complement each other and prove to be a very efficient tool for performing optimization studies of mechanical components.

  13. Modelling of cantilever based on piezoelectric energy harvester

    NASA Astrophysics Data System (ADS)

    Rahim, N. F.; Ong, N. R.; Aziz, M. H. A.; Alcain, J. B.; Haimi, W. M. W. N.; Sauli, Z.

    2017-09-01

    Recent technology allows devices to become smaller and with more functions. However, the battery size remained the same and for some devices, the battery must be larger in order to accommodate the greater power demands by the portable device. Piezoelectric energy harvester has been suggested as a substitute for the batteries in coming future. In this paper, a cantilever based piezoelectric energy harvester was modelled and simulated using COMSOL software. The analysis focused on the mechanical part of the harvesting system such as output power, output voltage and vibration frequency. Results of the simulations proved that flexible piezoelectric energy harvesters using nano-materials had remarkable strength under the large strain. However, although the large strain was induced on the flexible energy harvesters, the output power was still lower than the bulk and MEMS piezoelectric energy harvesters that operated at the resonance frequency. The off-resonance operation and very lower packing density of the active piezoelectric materials of the flexible energy harvesters resulted in a low output power.

  14. Factors influencing the shear rate acting on silicone oil to cause silicone oil emulsification.

    PubMed

    Chan, Yau Kei; Cheung, Ning; Wong, David

    2014-10-30

    The shear force between silicone oil (SO) bubble and aqueous during eye movements may underlie the development of SO emulsification. This study examines factors that may affect such shear force induced by eye movements. A surface-modified model eye chamber was put under large-amplitude eye movements (amplitude 90°, angular velocity 360°/s, and a duration 300 ms). Agarose-made indentations were introduced to mimic the effect of encircling scleral buckle. Two SOs (1300 and 5000 centistokes [cSt]), three volumes (3, 4, and 5 mL), and two eye chambers (with and without indentation) were tested. Video recording was used to capture the movements of SO inside the model chamber under various conditions. The presence of indentation within the eye chamber significantly reduced the velocity of SO movements relative to the eye chamber movements (P < 0.001). To a lesser extent, an increase in viscosity also had a significant effect in reducing the relative movements. No significant effect was observed for the extent of SO fill in the chamber. Our experimental model suggests indentation within an eye, such as that created by scleral buckling, may have the greatest influence in reducing shear force induced by eye movements. Therefore, using an encircling scleral buckle may be similarly or more effective than using SO with higher viscosity in lowering the propensity to SO emulsification. Copyright 2014 The Association for Research in Vision and Ophthalmology, Inc.

  15. Piezoresistive cantilever force-clamp system

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Park, Sung-Jin; Petzold, Bryan C.; Pruitt, Beth L.

    2011-04-15

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or ''clamps'' the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to amore » sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of {mu}N force and nm up to tens of {mu}m displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode.« less

  16. Piezoresistive cantilever force-clamp system

    PubMed Central

    Park, Sung-Jin; Petzold, Bryan C.; Goodman, Miriam B.; Pruitt, Beth L.

    2011-01-01

    We present a microelectromechanical device-based tool, namely, a force-clamp system that sets or “clamps” the scaled force and can apply designed loading profiles (e.g., constant, sinusoidal) of a desired magnitude. The system implements a piezoresistive cantilever as a force sensor and the built-in capacitive sensor of a piezoelectric actuator as a displacement sensor, such that sample indentation depth can be directly calculated from the force and displacement signals. A programmable real-time controller operating at 100 kHz feedback calculates the driving voltage of the actuator. The system has two distinct modes: a force-clamp mode that controls the force applied to a sample and a displacement-clamp mode that controls the moving distance of the actuator. We demonstrate that the system has a large dynamic range (sub-nN up to tens of μN force and nm up to tens of μm displacement) in both air and water, and excellent dynamic response (fast response time, <2 ms and large bandwidth, 1 Hz up to 1 kHz). In addition, the system has been specifically designed to be integrated with other instruments such as a microscope with patch-clamp electronics. We demonstrate the capabilities of the system by using it to calibrate the stiffness and sensitivity of an electrostatic actuator and to measure the mechanics of a living, freely moving Caenorhabditis elegans nematode. PMID:21529009

  17. Production of electronic grade lunar silicon by disproportionation of silicon difluoride

    NASA Technical Reports Server (NTRS)

    Agosto, William N.

    1993-01-01

    Waldron has proposed to extract lunar silicon by sodium reduction of sodium fluorosilicate derived from reacting sodium fluoride with lunar silicon tetrafluoride. Silicon tetrafluoride is obtained by the action of hydrofluoric acid on lunar silicates. While these reactions are well understood, the resulting lunar silicon is not likely to meet electronic specifications of 5 nines purity. Dale and Margrave have shown that silicon difluoride can be obtained by the action of silicon tetrafluoride on elemental silicon at elevated temperatures (1100-1200 C) and low pressures (1-2 torr). The resulting silicon difluoride will then spontaneously disproportionate into hyperpure silicon and silicon tetrafluoride in vacuum at approximately 400 C. On its own merits, silicon difluoride polymerizes into a tough waxy solid in the temperature range from liquid nitrogen to about 100 C. It is the silicon analog of teflon. Silicon difluoride ignites in moist air but is stable under lunar surface conditions and may prove to be a valuable industrial material that is largely lunar derived for lunar surface applications. The most effective driver for lunar industrialization may be the prospects for industrial space solar power systems in orbit or on the moon that are built with lunar materials. Such systems would require large quantities of electronic grade silicon or compound semiconductors for photovoltaics and electronic controls. Since silicon is the most abundant semimetal in the silicate portion of any solar system rock (approximately 20 wt percent), lunar silicon production is bound to be an important process in such a solar power project. The lunar silicon extraction process is discussed.

  18. Experimental study on the resonance frequencies of a cantilevered plate in air flow

    NASA Astrophysics Data System (ADS)

    Cros, Anne; Arellano Castro, Rocío F.

    2016-02-01

    The present experimental work focuses on the resonances exhibited by a cantilevered plate immersed in airflow. The flexible plate is clamped at its leading edge and submitted to a small, lateral harmonic displacement. Throughout this work, our two control parameters are the forcing frequency and the air velocity. We determine experimentally the evolution of the first three resonant frequencies as air velocity is increased. Our results are in agreement with the Eloy et al. (2007) [1] and Michelin and Llewellyn-Smith (2009) [2] linear theoretical predictions.

  19. Elasticity Theory Solution of the Problem on Plane Bending of a Narrow Layered Cantilever Beam by Loads at Its Free End

    NASA Astrophysics Data System (ADS)

    Goryk, A. V.; Koval'chuk, S. B.

    2018-05-01

    An exact elasticity theory solution for the problem on plane bending of a narrow layered composite cantilever beam by tangential and normal loads distributed on its free end is presented. Components of the stress-strain state are found for the whole layers package by directly integrating differential equations of the plane elasticity theory problem by using an analytic representation of piecewise constant functions of the mechanical characteristics of layer materials. The continuous solution obtained is realized for a four-layer beam with account of kinematic boundary conditions simulating the rigid fixation of its one end. The solution obtained allows one to predict the strength and stiffness of composite cantilever beams and to construct applied analytical solutions for various problems on the elastic bending of layered beams.

  20. Various methods of determining the natural frequencies and damping of composite cantilever plates. 3. The Ritz method

    NASA Astrophysics Data System (ADS)

    Ekel'chik, V. S.; Ryabov, V. M.

    1997-03-01

    The Ritz method was used to determine the frequencies and forms of free vibrations of rectangular cantilever plates made of anisotropic laminated composites. Orthogonal Jacobi and Legendre polynomials were used as coordinate functions. The results of the calculations are in good agreement with the published experimental and calculated data of other authors for plates made of boron and carbon fiber reinforced plastics with different angles of reinforcement of unidirectional layers and different sequence of placing the layers, and also of isotropic plates. The dissipative characteristics in vibrations were determined on the basis of the concept of complex moduli. The solution of the frequency equation with complex coefficients yields a complex frequency; the loss factors are determined from the ratio of the imaginary component of the complex frequency to the real component. For plates of unidirectionally reinforced carbon fiber plastic with different relative length a detailed analysis of the influence of the angle of reinforcement on the interaction and frequency transformation and on the loss factor was carried out. The article shows that the loss factor of a plate depends substantially on the type of vibration mode: bending or torsional. It also examines the asymptotics of the loss factors of plates when their length is increased, and it notes that the binomial model of deformation leads to a noticeable error in the calculation of the loss factor of long plates when the angle of reinforcement lies in the range 20°<φ<70°.

  1. Silicon nanopillars for field enhanced surface spectroscopy

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wells, Sabrina M; Merkulov, Igor A; Kravchenko, Ivan I

    Silicon nanowire and nanopillar structures have continued to draw increased attention in recent years due in part to their unique optical properties. Herein, electron beam lithography combined with reactive-ion etching is used to reproducibly create individual silicon nanopillars of various sizes, shapes, and heights. Finite difference time domain numerical analysis predicts enhancements in localized fields in the vicinity of appropriately-sized and coaxially-illuminated silicon nanopillars of approximately two orders of magnitude. By analyzing experimentally measured strength of the silicon Raman phonon line (500 cm-1), it was determined that nanopillars produced field enhancement that are consistent with these predictions. Additionally, we demonstratemore » that a thin layer of Zn phthalocyanine deposited on the nanopillar surface produced prominent Raman spectra yielding enhancement factors (EFs) better than 300. Finally, silicon nanopillars of cylindrical and elliptical shapes were labeled with different fluorophors and evaluated for their surface enhanced fluorescence (SEF) capability. The EF derived from analysis of the acquired fluorescence microscopy images indicate that silicon nanopillar structures can provide enhancement comparable or even stronger than those typically achieved using plasmonic SEF structures without the drawbacks of the metal-based substrates. It is anticipated that scaled up arrays of silicon nanopillars will enable SEF assays with extremely high sensitivity, while a broader impact of the reported phenomena are anticipated in photovoltaics, subwavelength light focusing, and fundamental nanophotonics.« less

  2. Method of making silicon carbide-silicon composite having improved oxidation resistance

    NASA Technical Reports Server (NTRS)

    Wang, Hongyu (Inventor); Luthra, Krishan Lal (Inventor)

    2002-01-01

    A Silicon carbide-silicon matrix composite having improved oxidation resistance at high temperatures in dry or water-containing environments is provided. A method is given for sealing matrix cracks in situ in melt infiltrated silicon carbide-silicon matrix composites. The composite cracks are sealed by the addition of various additives, such as boron compounds, into the melt infiltrated silicon carbide-silicon matrix.

  3. Direct measurement of AC electrokinetics properties and capture frequencies of silicon and silicon-germanium nanowires

    NASA Astrophysics Data System (ADS)

    Merhej, M.; Honegger, T.; Bassani, F.; Baron, T.; Peyrade, D.; Drouin, D.; Salem, B.

    2018-01-01

    The assembly of semiconductor nanowires with nanoscale precision is crucial for their integration into functional systems. In this work, we propose a novel method to experimentally determine the real part of the Clausius-Mossotti factor (CMF) of silicon and silicon-germanium nanowires. The quantification of this CMF is measured with the nanowires velocities in a pure dielectrophoretic regime. This approach combined with a study on the connected nanowires alignment yield has led to a frequency of capture evaluation. In addition, we have also presented the morphology of nanowires assembly using dielectrophoresis for a wide frequency variation of AC electric fields.

  4. Solar silicon from directional solidification of MG silicon produced via the silicon carbide route

    NASA Technical Reports Server (NTRS)

    Rustioni, M.; Margadonna, D.; Pirazzi, R.; Pizzini, S.

    1986-01-01

    A process of metallurgical grade (MG) silicon production is presented which appears particularly suitable for photovoltaic (PV) applications. The MG silicon is prepared in a 240 KVA, three electrode submerged arc furnace, starting from high grade quartz and high purity silicon carbide. The silicon smelted from the arc furnace was shown to be sufficiently pure to be directionally solidified to 10 to 15 kg. After grinding and acid leaching, had a material yield larger than 90%. With a MG silicon feedstock containing 3 ppmw B, 290 ppmw Fe, 190 ppmw Ti, and 170 ppmw Al, blended with 50% of off grade electronic grade (EG) silicon to reconduct the boron content to a concentration acceptable for solar cell fabrication, the 99% of deep level impurities were concentrated in the last 5% of the ingot. Quite remarkably this material has OCV values higher tham 540 mV and no appreciable shorts due to SiC particles.

  5. Colloidal characterization of ultrafine silicon carbide and silicon nitride powders

    NASA Technical Reports Server (NTRS)

    Whitman, Pamela K.; Feke, Donald L.

    1986-01-01

    The effects of various powder treatment strategies on the colloid chemistry of aqueous dispersions of silicon carbide and silicon nitride are examined using a surface titration methodology. Pretreatments are used to differentiate between the true surface chemistry of the powders and artifacts resulting from exposure history. Silicon nitride powders require more extensive pretreatment to reveal consistent surface chemistry than do silicon carbide powders. As measured by titration, the degree of proton adsorption from the suspending fluid by pretreated silicon nitride and silicon carbide powders can both be made similar to that of silica.

  6. The small length scale effect for a non-local cantilever beam: a paradox solved.

    PubMed

    Challamel, N; Wang, C M

    2008-08-27

    Non-local continuum mechanics allows one to account for the small length scale effect that becomes significant when dealing with microstructures or nanostructures. This paper presents some simplified non-local elastic beam models, for the bending analyses of small scale rods. Integral-type or gradient non-local models abandon the classical assumption of locality, and admit that stress depends not only on the strain value at that point but also on the strain values of all points on the body. There is a paradox still unresolved at this stage: some bending solutions of integral-based non-local elastic beams have been found to be identical to the classical (local) solution, i.e. the small scale effect is not present at all. One example is the Euler-Bernoulli cantilever nanobeam model with a point load which has application in microelectromechanical systems and nanoelectromechanical systems as an actuator. In this paper, it will be shown that this paradox may be overcome with a gradient elastic model as well as an integral non-local elastic model that is based on combining the local and the non-local curvatures in the constitutive elastic relation. The latter model comprises the classical gradient model and Eringen's integral model, and its application produces small length scale terms in the non-local elastic cantilever beam solution.

  7. Single cell adhesion force measurement for cell viability identification using an AFM cantilever-based micro putter

    NASA Astrophysics Data System (ADS)

    Shen, Yajing; Nakajima, Masahiro; Kojima, Seiji; Homma, Michio; Kojima, Masaru; Fukuda, Toshio

    2011-11-01

    Fast and sensitive cell viability identification is a key point for single cell analysis. To address this issue, this paper reports a novel single cell viability identification method based on the measurement of single cell shear adhesion force using an atomic force microscopy (AFM) cantilever-based micro putter. Viable and nonviable yeast cells are prepared and put onto three kinds of substrate surfaces, i.e. tungsten probe, gold and ITO substrate surfaces. A micro putter is fabricated from the AFM cantilever by focused ion beam etching technique. The spring constant of the micro putter is calibrated using the nanomanipulation approach. The shear adhesion force between the single viable or nonviable cell and each substrate is measured using the micro putter based on the nanorobotic manipulation system inside an environmental scanning electron microscope. The adhesion force is calculated based on the deflection of the micro putter beam. The results show that the adhesion force of the viable cell to the substrate is much larger than that of the nonviable cell. This identification method is label free, fast, sensitive and can give quantitative results at the single cell level.

  8. Shear sensing in bonded composites with cantilever beam microsensors and dual-plane digital image correlation

    NASA Astrophysics Data System (ADS)

    Baur, Jeffery W.; Slinker, Keith; Kondash, Corey

    2017-04-01

    Understanding the shear strain, viscoelastic response, and onset of damage within bonded composites is critical to their design, processing, and reliability. This presentation will discuss the multidisciplinary research conducted which led to the conception, development, and demonstration of two methods for measuring the shear within a bonded joint - dualplane digital image correlation (DIC) and a micro-cantilever shear sensor. The dual plane DIC method was developed to measure the strain field on opposing sides of a transparent single-lap joint in order to spatially quantify the joint shear strain. The sensor consists of a single glass fiber cantilever beam with a radially-grown forest of carbon nanotubes (CNTs) within a capillary pore. When the fiber is deflected, the internal radial CNT array is compressed against an electrode within the pore and the corresponding decrease in electrical resistance is correlated with the external loading. When this small, simple, and low-cost sensor was integrated within a composite bonded joint and cycled in tension, the onset of damage prior to joint failure was observed. In a second sample configuration, both the dual plane DIC and the hair sensor detected viscoplastic changes in the strain of the sample in response to continued loading.

  9. Develop Silicone Encapsulation Systems for Terrestrial Silicon Solar Arrays

    NASA Technical Reports Server (NTRS)

    1979-01-01

    The results for Task 3 of the Low Cost Solar Array Project are presented. Task 3 is directed toward the development of a cost effective encapsulating system for photovoltaic modules using silicon based materials. The technical approach of the contract effort is divided into four special tasks: (1) technology review; (2) generation of concepts for screening and processing silicon encapsulation systems; (3) assessment of encapsulation concepts; and (4) evaluation of encapsulation concepts. The candidate silicon materials are reviewed. The silicon and modified silicon resins were chosen on the basis of similarity to materials with known weatherability, cost, initial tangential modulus, accelerated dirt pick-up test results and the ratio of the content of organic phenyl substitution of methyl substitution on the backbone of the silicon resin.

  10. Ion beam figuring of silicon aspheres

    NASA Astrophysics Data System (ADS)

    Demmler, Marcel; Zeuner, Michael; Luca, Alfonz; Dunger, Thoralf; Rost, Dirk; Kiontke, Sven; Krüger, Marcus

    2011-03-01

    Silicon lenses are widely used for infrared applications. Especially for portable devices the size and weight of the optical system are very important factors. The use of aspherical silicon lenses instead of spherical silicon lenses results in a significant reduction of weight and size. The manufacture of silicon lenses is more challenging than the manufacture of standard glass lenses. Typically conventional methods like diamond turning, grinding and polishing are used. However, due to the high hardness of silicon, diamond turning is very difficult and requires a lot of experience. To achieve surfaces of a high quality a polishing step is mandatory within the manufacturing process. Nevertheless, the required surface form accuracy cannot be achieved through the use of conventional polishing methods because of the unpredictable behavior of the polishing tools, which leads to an unstable removal rate. To overcome these disadvantages a method called Ion Beam Figuring can be used to manufacture silicon lenses with high surface form accuracies. The general advantage of the Ion Beam Figuring technology is a contactless polishing process without any aging effects of the tool. Due to this an excellent stability of the removal rate without any mechanical surface damage is achieved. The related physical process - called sputtering - can be applied to any material and is therefore also applicable to materials of high hardness like Silicon (SiC, WC). The process is realized through the commercially available ion beam figuring system IonScan 3D. During the process, the substrate is moved in front of a focused broad ion beam. The local milling rate is controlled via a modulated velocity profile, which is calculated specifically for each surface topology in order to mill the material at the associated positions to the target geometry. The authors will present aspherical silicon lenses with very high surface form accuracies compared to conventionally manufactured lenses.

  11. Interdisciplinary cantilever physics: Elasticity of carrot, celery, and plasticware

    NASA Astrophysics Data System (ADS)

    Pestka, Kenneth A.

    2014-05-01

    This article presents several simple cantilever-based experiments using common household items (celery, carrot, and a plastic spoon) that are appropriate for introductory undergraduate laboratories or independent student projects. By applying Hooke's law and Euler beam theory, students are able to determine Young's modulus, fracture stress, yield stress, strain energy, and sound speed of these apparently disparate materials. In addition, a cellular foam elastic model is introduced—applicable to biologic materials as well as an essential component in the development of advanced engineering composites—that provides a mechanism to determine Young's modulus of the cell wall material found in celery and carrot. These experiments are designed to promote exploration of the similarities and differences between common inorganic and organic materials, fill a void in the typical undergraduate curriculum, and provide a foundation for more advanced material science pursuits within biology, botany, and food science as well as physics and engineering.

  12. Extraction of depth-dependent perturbation factors for silicon diodes using a plastic scintillation detector.

    PubMed

    Lacroix, Frederic; Guillot, Mathieu; McEwen, Malcolm; Gingras, Luc; Beaulieu, Luc

    2011-10-01

    This work presents the experimental extraction of the perturbation factor in megavoltage electron beams for three models of silicon diodes (IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded) using a plastic scintillation detector (PSD). The authors used a single scanning PSD mounted on a high-precision scanning tank to measure depth-dose curves in 6-, 12-, and 18-MeV clinical electron beams. They also measured depth-dose curves using the IBA Dosimetry, EFD and SFD, and the PTW 60012 unshielded diodes. The authors used the depth-dose curves measured with the PSD as a perturbation-free reference to extract the perturbation factors of the diodes. The authors found that the perturbation factors for the diodes increased substantially with depth, especially for low-energy electron beams. The experimental results show the same trend as published Monte Carlo simulation results for the EFD diode; however, the perturbations measured experimentally were greater. They found that using an effective point of measurement (EPOM) placed slightly away from the source reduced the variation of perturbation factors with depth and that the optimal EPOM appears to be energy dependent. The manufacturer recommended EPOM appears to be incorrect at low electron energy (6 MeV). In addition, the perturbation factors for diodes may be greater than predicted by Monte Carlo simulations.

  13. Study on Silicon Microstructure Processing Technology Based on Porous Silicon

    NASA Astrophysics Data System (ADS)

    Shang, Yingqi; Zhang, Linchao; Qi, Hong; Wu, Yalin; Zhang, Yan; Chen, Jing

    2018-03-01

    Aiming at the heterogeneity of micro - sealed cavity in silicon microstructure processing technology, the technique of preparing micro - sealed cavity of porous silicon is proposed. The effects of different solutions, different substrate doping concentrations, different current densities, and different etching times on the rate, porosity, thickness and morphology of the prepared porous silicon were studied. The porous silicon was prepared by different process parameters and the prepared porous silicon was tested and analyzed. For the test results, optimize the process parameters and experiments. The experimental results show that the porous silicon can be controlled by optimizing the parameters of the etching solution and the doping concentration of the substrate, and the preparation of porous silicon with different porosity can be realized by different doping concentration, so as to realize the preparation of silicon micro-sealed cavity, to solve the sensor sensitive micro-sealed cavity structure heterogeneous problem, greatly increasing the application of the sensor.

  14. How to treat two adjacent missing teeth with dental implants. A systematic review on single implant-supported two-unit cantilever FDP's and results of a 5-year prospective comparative study in the aesthetic zone.

    PubMed

    Van Nimwegen, W G; Raghoebar, G M; Tymstra, N; Vissink, A; Meijer, H J A

    2017-06-01

    To conduct a systematic review on the clinical outcome of single implant-supported two-unit cantilever FDP's and to conduct a 5-year prospective comparative pilot study of patients with a missing central and lateral upper incisor treated with either a single implant-supported two-unit cantilever FDP or two implants with solitary implant crowns in the aesthetic zone. Medline, Embase and the Cochrane Central Register of Controlled Trials were searched (last search 1 August 2016) for eligible studies. In the comparative pilot study, an implant-cantilever group of five patients with a single implant-supported two-unit cantilever FDP (NobelReplace Groovy Regular Platform) was compared with an implant-implant group of five patients with two adjacent single implant-supported crowns (NobelReplace Groovy Regular Platform) in the aesthetic zone. Implant survival, marginal bone level (MBL) changes, pocket probing depth, papilla index and patient satisfaction were assessed during a 5-year follow-up period. Five of 276 articles were considered eligible for data extraction. Implant survival ranged from 96·6% to 100%. Marginal bone level changes were higher in the anterior region than in the posterior region. Technical complications occurred more often in the posterior than anterior region. In the 5-year comparative pilot study, no clinically significant differences in hard and soft peri-implant tissue levels occurred between both groups. Single implant-supported two-unit cantilever FDP's can be a viable alternative to the placement of two adjacent single implant crowns in the aesthetic zone. Due to technical complications, placement of two-unit cantilever crowns in the posterior region can be considered unwise. © 2017 John Wiley & Sons Ltd.

  15. Silicon-doped boron nitride coated fibers in silicon melt infiltrated composites

    DOEpatents

    Corman, Gregory Scot; Luthra, Krishan Lal

    2002-01-01

    A fiber-reinforced silicon-silicon carbide matrix composite having improved oxidation resistance at high temperatures in dry or water-containing environments is produced. The invention also provides a method for protecting the reinforcing fibers in the silicon-silicon carbide matrix composites by coating the fibers with a silicon-doped boron nitride coating.

  16. Silicon-doped boron nitride coated fibers in silicon melt infiltrated composites

    DOEpatents

    Corman, Gregory Scot; Luthra, Krishan Lal

    1999-01-01

    A fiber-reinforced silicon--silicon carbide matrix composite having improved oxidation resistance at high temperatures in dry or water-containing environments is produced. The invention also provides a method for protecting the reinforcing fibers in the silicon--silicon carbide matrix composites by coating the fibers with a silicon-doped boron nitride coating.

  17. Damping MEMS Devices in Harsh Environments Using Active Thin Films

    DTIC Science & Technology

    2008-06-17

    properties of the layers was developed. Damping properties in Nitinol thin film due only to residual stresses was measured to be as high as tan delta...0.17 for large strain (0.9%). At lower strain levels a Nitinol /Silicon laminate was tested in a cantilever load frame. The damping value of the...film was measured to be 0.28 (at 0.27% strain). A Nitinol /Terfenol-D/Nickel laminate was fabricated and tested in a cantilever loading. The damping

  18. Silicon nitride/silicon carbide composite densified materials prepared using composite powders

    DOEpatents

    Dunmead, S.D.; Weimer, A.W.; Carroll, D.F.; Eisman, G.A.; Cochran, G.A.; Susnitzky, D.W.; Beaman, D.R.; Nilsen, K.J.

    1997-07-01

    Prepare silicon nitride-silicon carbide composite powders by carbothermal reduction of crystalline silica powder, carbon powder and, optionally, crystalline silicon nitride powder. The crystalline silicon carbide portion of the composite powders has a mean number diameter less than about 700 nanometers and contains nitrogen. The composite powders may be used to prepare sintered ceramic bodies and self-reinforced silicon nitride ceramic bodies.

  19. Silicon carbide-silicon composite having improved oxidation resistance and method of making

    NASA Technical Reports Server (NTRS)

    Wang, Hongyu (Inventor); Luthra, Krishan Lal (Inventor)

    1999-01-01

    A Silicon carbide-silicon matrix composite having improved oxidation resistance at high temperatures in dry or water-containing environments is provided. A method is given for sealing matrix cracks in situ in melt infiltrated silicon carbide-silicon matrix composites. The composite cracks are sealed by the addition of various additives, such as boron compounds, into the melt infiltrated silicon carbide-silicon matrix.

  20. Whatever happened to silicon carbide. [semiconductor devices

    NASA Technical Reports Server (NTRS)

    Campbell, R. B.

    1981-01-01

    The progress made in silicon carbide semiconductor devices in the 1955 to 1975 time frame is examined and reasons are given for the present lack of interest in the material. Its physical and chemical properties and methods of preparation are discussed. Fabrication techniques and the characteristics of silicon carbide devices are reviewed. It is concluded that a combination of economic factors and the lack of progress in fabrication techniques leaves no viable market for SiC devices in the near future.

  1. Performance of zirconia ceramic cantilever fixed dental prostheses: 3-year results from a prospective, randomized, controlled pilot study.

    PubMed

    Zenthöfer, Andreas; Ohlmann, Brigitte; Rammelsberg, Peter; Bömicke, Wolfgang

    2015-07-01

    Little is known about the clinical performance of ceramic cantilever fixed dental prostheses on natural teeth. The purpose of this randomized controlled pilot study was to evaluate the clinical performance of ceramic and metal ceramic cantilever fixed dental prostheses (CFDPs) after 3 years of service. Twenty-one participants were randomly allocated to 2 treatment groups. Participants in the ceramic (ZC) group (n=11) each received 1 CFDP made of yttria-stabilized, tetragonal zirconia polycrystal; the others (n=10) were fitted with a metal ceramic (MC) CFDP. All CFDPs were retained by 2 complete crown abutments and replaced 1 tooth. The clinical target variables were survival, incidence of complications, probing pocket depth (PPD), probing attachment level (PAL), plaque index (PI), gingival index (GI), and esthetic performance as rated by the participants. The United States Public Health Service (USPHS) criteria were used to evaluate chipping, retention, color, marginal integrity, and secondary caries. Descriptive statistics and nonparametric analyses were applied to the target variables in the 2 groups. The esthetic performance of the CFDPs was also visualized by using a pyramid comparison. The overall survival of the CFDPs was 100% in both groups. During the 3-year study, 6 clinically relevant complications requiring aftercare were observed among 5 participants (4 in the ZC group and 2 in the MC group). Changes in the PI, GI, PPD, and PAL of the abutment teeth were similar for both groups (P>.05). The participants regarded the esthetic performance of ZC-CFDPs and MC-CFDPs as satisfactory. Within the 3-year observation period, the clinical performance of MC-FDPs and ZC-FDPs was acceptable. More extensive research with larger sample sizes is encouraged, however, to confirm the evaluation of the survival of Y-TZP hand-veneered cantilever FPDs. Copyright © 2015 Editorial Council for the Journal of Prosthetic Dentistry. Published by Elsevier Inc. All rights reserved.

  2. Optical performance of hybrid porous silicon-porous alumina multilayers

    NASA Astrophysics Data System (ADS)

    Cencha, L. G.; Antonio Hernández, C.; Forzani, L.; Urteaga, R.; Koropecki, R. R.

    2018-05-01

    In this work, we study the optical response of structures involving porous silicon and porous alumina in a multi-layered hybrid structure. We performed a rational design of the optimal sequence necessary to produce a high transmission and selective filter, with potential applications in chemical and biosensors. The combination of these porous materials can be used to exploit its distinguishing features, i.e., high transparency of alumina and high refractive index of porous silicon. We assembled hybrid microcavities with a central porous alumina layer between two porous silicon Bragg reflectors. In this way, we constructed a Fabry-Perot resonator with high reflectivity and low absorption that improves the quality of the filter compared to a microcavity built only with porous silicon or porous alumina. We explored a simpler design in which one of the Bragg reflectors is replaced by the aluminium that remains bound to the alumina after its fabrication. We theoretically explored the potential of the proposal and its limitations when considering the roughness of the layers. We found that the quality of a microcavity made entirely with porous silicon shows a limit in the visible range due to light absorption. This limitation is overcome in the hybrid scheme, with the roughness of the layers determining the ultimate quality. Q-factors of 220 are experimentally obtained for microcavities supported on aluminium, while Q-factors around 600 are reached for microcavities with double Bragg reflectors, centred at 560 nm. This represents a four-fold increase with respect to the optimal porous silicon microcavity at this wavelength.

  3. Polycrystalline silicon study: Low-cost silicon refining technology prospects and semiconductor-grade polycrystalline silicon availability through 1988

    NASA Technical Reports Server (NTRS)

    Costogue, E. N.; Ferber, R.; Lutwack, R.; Lorenz, J. H.; Pellin, R.

    1984-01-01

    Photovoltaic arrays that convert solar energy into electrical energy can become a cost effective bulk energy generation alternative, provided that an adequate supply of low cost materials is available. One of the key requirements for economic photovoltaic cells is reasonably priced silicon. At present, the photovoltaic industry is dependent upon polycrystalline silicon refined by the Siemens process primarily for integrated circuits, power devices, and discrete semiconductor devices. This dependency is expected to continue until the DOE sponsored low cost silicon refining technology developments have matured to the point where they are in commercial use. The photovoltaic industry can then develop its own source of supply. Silicon material availability and market pricing projections through 1988 are updated based on data collected early in 1984. The silicon refining industry plans to meet the increasing demands of the semiconductor device and photovoltaic product industries are overviewed. In addition, the DOE sponsored technology research for producing low cost polycrystalline silicon, probabilistic cost analysis for the two most promising production processes for achieving the DOE cost goals, and the impacts of the DOE photovoltaics program silicon refining research upon the commercial polycrystalline silicon refining industry are addressed.

  4. Materials characterization and fracture mechanics of a space grade dielectric silicone insulation

    NASA Technical Reports Server (NTRS)

    Abdel-Latif, A. I.; Tweedie, A. T.

    1982-01-01

    The present investigation is concerned with the DC 93-500 high voltage silicone insulation material employed to pot the gun and the collector end of a traveling wave tube (TWT) used on the Landsat D Satellite. The fracture mechanics behavior of the silicone resin was evaluated by measuring the slow crack velocity as a function of the opening mode of the stress intensity factor at +25 and -10 C, taking into account various uniaxial discrete strain values. It was found that the silicone resins slow crack growth is faster than that for a high voltage insulation polyurethane material at the same stress intensity factor value and room temperature.

  5. Health monitoring of carbon cantilever using femtosecond laser inscribed FBG array in gradient-index CYTOP polymer fibre

    NASA Astrophysics Data System (ADS)

    Theodosiou, Antreas; Kalli, Kyriacos; Komodromos, Michael

    2017-04-01

    We report on the femtosecond laser inscription of a fibre Bragg grating array in multimode, gradient-index, CYTOP polymer optical fibre and its demonstration as a quasi-distributed sensor for cantilever health monitoring measurements. We exploit the key advantage of polymer optical fibres, having a significantly lower Young's modulus compared with silica fibres, for vibration measurements. We also modify the typical multi-mode Bragg grating spectrum through control of the femtosecond laser inscription process, thereby producing gratings having single peak wavelength spectra. The sensor array is used to recover the time-dependent, wavelength response from each Bragg grating sensor and extract the mode shape of the beam. The mode shapes of the beam were used to observe "damage" introduced to the cantilever by adding masses to its surface; adjusting the level of damage by using different weights and placing them at different point across the beam. We show that health monitoring measurements are feasible with polymer based fibre Bragg gratings. The accurate and rapid detection of damage points on structural beams and the damage level is an important parameter for improved maintenance and servicing of beams under load and for the prevention of long-term damage.

  6. Silicon Isotopic Fractionation of CAI-like Vacuum Evaporation Residues

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Knight, K; Kita, N; Mendybaev, R

    2009-06-18

    Calcium-, aluminum-rich inclusions (CAIs) are often enriched in the heavy isotopes of magnesium and silicon relative to bulk solar system materials. It is likely that these isotopic enrichments resulted from evaporative mass loss of magnesium and silicon from early solar system condensates while they were molten during one or more high-temperature reheating events. Quantitative interpretation of these enrichments requires laboratory determinations of the evaporation kinetics and associated isotopic fractionation effects for these elements. The experimental data for the kinetics of evaporation of magnesium and silicon and the evaporative isotopic fractionation of magnesium is reasonably complete for Type B CAI liquidsmore » (Richter et al., 2002, 2007a). However, the isotopic fractionation factor for silicon evaporating from such liquids has not been as extensively studied. Here we report new ion microprobe silicon isotopic measurements of residual glass from partial evaporation of Type B CAI liquids into vacuum. The silicon isotopic fractionation is reported as a kinetic fractionation factor, {alpha}{sub Si}, corresponding to the ratio of the silicon isotopic composition of the evaporation flux to that of the residual silicate liquid. For CAI-like melts, we find that {alpha}{sub Si} = 0.98985 {+-} 0.00044 (2{sigma}) for {sup 29}Si/{sup 28}Si with no resolvable variation with temperature over the temperature range of the experiments, 1600-1900 C. This value is different from what has been reported for evaporation of liquid Mg{sub 2}SiO{sub 4} (Davis et al., 1990) and of a melt with CI chondritic proportions of the major elements (Wang et al., 2001). There appears to be some compositional control on {alpha}{sub Si}, whereas no compositional effects have been reported for {alpha}{sub Mg}. We use the values of {alpha}Si and {alpha}Mg, to calculate the chemical compositions of the unevaporated precursors of a number of isotopically fractionated CAIs from CV chondrites

  7. 3D silicone rubber interfaces for individually tailored implants.

    PubMed

    Stieghorst, Jan; Bondarenkova, Alexandra; Burblies, Niklas; Behrens, Peter; Doll, Theodor

    2015-01-01

    For the fabrication of customized silicone rubber based implants, e.g. cochlear implants or electrocortical grid arrays, it is required to develop high speed curing systems, which vulcanize the silicone rubber before it runs due to a heating related viscosity drop. Therefore, we present an infrared radiation based cross-linking approach for the 3D-printing of silicone rubber bulk and carbon nanotube based silicone rubber electrode materials. Composite materials were cured in less than 120 s and material interfaces were evaluated with scanning electron microscopy. Furthermore, curing related changes in the mechanical and cell-biological behaviour were investigated with tensile and WST-1 cell biocompatibility tests. The infrared absorption properties of the silicone rubber materials were analysed with fourier transform infrared spectroscopy in transmission and attenuated total reflection mode. The heat flux was calculated by using the FTIR data, emissivity data from the infrared source manufacturer and the geometrical view factor of the system.

  8. Silver nanowires for highly reproducible cantilever based AFM-TERS microscopy: towards a universal TERS probe.

    PubMed

    Walke, Peter; Fujita, Yasuhiko; Peeters, Wannes; Toyouchi, Shuichi; Frederickx, Wout; De Feyter, Steven; Uji-I, Hiroshi

    2018-04-26

    Tip-enhanced Raman scattering (TERS) microscopy is a unique analytical tool to provide complementary chemical and topographic information of surfaces with nanometric resolution. However, difficulties in reliably producing the necessary metallized scanning probe tips has limited its widespread utilisation, particularly in the case of cantilever-based atomic force microscopy. Attempts to alleviate tip related issues using colloidal or bottom-up engineered tips have so far not reported consistent probes for both Raman and topographic imaging. Here we demonstrate the reproducible fabrication of cantilever-based high-performance TERS probes for both topographic and Raman measurements, based on an approach that utilises noble metal nanowires as the active TERS probe. The tips show 10 times higher TERS contrasts than the most typically used electrochemically-etched tips, and show a reproducibility for TERS greater than 90%, far greater than found with standard methods. We show that TERS can be performed in tapping as well as contact AFM mode, with optical resolutions around or below 15 nm, and with a maximum resolution achieved in tapping-mode of 6 nm. Our work illustrates that superior TERS probes can be produced in a fast and cost-effective manner using simple wet-chemistry methods, leading to reliable and reproducible high-resolution and high-sensitivity TERS, and thus renders the technique applicable for a broad community.

  9. Entrance dose measurements for in‐vivo diode dosimetry: Comparison of correction factors for two types of commercial silicon diode detectors

    PubMed Central

    Zhu, X. R.

    2000-01-01

    Silicon diode dosimeters have been used routinely for in‐vivo dosimetry. Despite their popularity, an appropriate implementation of an in‐vivo dosimetry program using diode detectors remains a challenge for clinical physicists. One common approach is to relate the diode readout to the entrance dose, that is, dose to the reference depth of maximum dose such as dmax for the 10×10 cm2 field. Various correction factors are needed in order to properly infer the entrance dose from the diode readout, depending on field sizes, target‐to‐surface distances (TSD), and accessories (such as wedges and compensate filters). In some clinical practices, however, no correction factor is used. In this case, a diode‐dosimeter‐based in‐vivo dosimetry program may not serve the purpose effectively; that is, to provide an overall check of the dosimetry procedure. In this paper, we provide a formula to relate the diode readout to the entrance dose. Correction factors for TSD, field size, and wedges used in this formula are also clearly defined. Two types of commercial diode detectors, ISORAD (n‐type) and the newly available QED (p‐type) (Sun Nuclear Corporation), are studied. We compared correction factors for TSDs, field sizes, and wedges. Our results are consistent with the theory of radiation damage of silicon diodes. Radiation damage has been shown to be more serious for n‐type than for p‐type detectors. In general, both types of diode dosimeters require correction factors depending on beam energy, TSD, field size, and wedge. The magnitudes of corrections for QED (p‐type) diodes are smaller than ISORAD detectors. PACS number(s): 87.66.–a, 87.52.–g PMID:11674824

  10. Glass-silicon column

    DOEpatents

    Yu, Conrad M.

    2003-12-30

    A glass-silicon column that can operate in temperature variations between room temperature and about 450.degree. C. The glass-silicon column includes large area glass, such as a thin Corning 7740 boron-silicate glass bonded to a silicon wafer, with an electrode embedded in or mounted on glass of the column, and with a self alignment silicon post/glass hole structure. The glass/silicon components are bonded, for example be anodic bonding. In one embodiment, the column includes two outer layers of silicon each bonded to an inner layer of glass, with an electrode imbedded between the layers of glass, and with at least one self alignment hole and post arrangement. The electrode functions as a column heater, and one glass/silicon component is provided with a number of flow channels adjacent the bonded surfaces.

  11. Stress intensity factor in a tapered specimen

    NASA Technical Reports Server (NTRS)

    Xue-Hui, L.; Erdogan, F.

    1985-01-01

    The general problem of a tapered specimen containing an edge crack is formulated in terms of a system of singular integral equations. The equations are solved and the stress intensity factor is calculated for a compact and for a slender tapered specimen, the latter simulating the double cantilever beam. The results are obtained primarily for a pair of concentrated forces and for crack surface wedge forces. The stress intensity factors are also obtained for a long strip under uniform tension which contains inclined edge cracks.

  12. Vertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform.

    PubMed

    Li, Qing; Eftekhar, Ali A; Sodagar, Majid; Xia, Zhixuan; Atabaki, Amir H; Adibi, Ali

    2013-07-29

    We demonstrate a vertical integration of high-Q silicon nitride microresonators into the silicon-on-insulator platform for applications at the telecommunication wavelengths. Low-loss silicon nitride films with a thickness of 400 nm are successfully grown, enabling compact silicon nitride microresonators with ultra-high intrinsic Qs (~ 6 × 10(6) for 60 μm radius and ~ 2 × 10(7) for 240 μm radius). The coupling between the silicon nitride microresonator and the underneath silicon waveguide is based on evanescent coupling with silicon dioxide as buffer. Selective coupling to a desired radial mode of the silicon nitride microresonator is also achievable using a pulley coupling scheme. In this work, a 60-μm-radius silicon nitride microresonator has been successfully integrated into the silicon-on-insulator platform, showing a single-mode operation with an intrinsic Q of 2 × 10(6).

  13. Numerical investigation of the effects of compressibility on the flutter of a cantilevered plate in an inviscid, subsonic, open flow

    NASA Astrophysics Data System (ADS)

    Colera, Manuel; Pérez-Saborid, Miguel

    2018-06-01

    We have carried out a numerical study of the influence of the upstream Mach number on the flutter of a two-dimensional, cantilevered, flexible plate subject to a subsonic, inviscid, open flow. We have assumed a linear elastic model for the plate and that the fluid flow is governed by the linearized potential theory. The fluid equations are solved with a novel frequency-domain, finite differences method to obtain the generalized aerodynamic forces as a function of the plate displacements. Then, these generalized forces are coupled to the equation of motion of the plate and an eigenvalue analysis is performed to find the flutter point. The obtained results are in good agreement with those of related theoretical and experimental studies found in the literature. To the best of our knowledge, the analysis performed here is the first self-consistent, parametric study of the influence of the compressibility on the flutter point of a two-dimensional cantilevered plate in subsonic flow.

  14. Purified silicon production system

    DOEpatents

    Wang, Tihu; Ciszek, Theodore F.

    2004-03-30

    Method and apparatus for producing purified bulk silicon from highly impure metallurgical-grade silicon source material at atmospheric pressure. Method involves: (1) initially reacting iodine and metallurgical-grade silicon to create silicon tetraiodide and impurity iodide byproducts in a cold-wall reactor chamber; (2) isolating silicon tetraiodide from the impurity iodide byproducts and purifying it by distillation in a distillation chamber; and (3) transferring the purified silicon tetraiodide back to the cold-wall reactor chamber, reacting it with additional iodine and metallurgical-grade silicon to produce silicon diiodide and depositing the silicon diiodide onto a substrate within the cold-wall reactor chamber. The two chambers are at atmospheric pressure and the system is open to allow the introduction of additional source material and to remove and replace finished substrates.

  15. Electrical leakage phenomenon in heteroepitaxial cubic silicon carbide on silicon

    NASA Astrophysics Data System (ADS)

    Pradeepkumar, Aiswarya; Zielinski, Marcin; Bosi, Matteo; Verzellesi, Giovanni; Gaskill, D. Kurt; Iacopi, Francesca

    2018-06-01

    Heteroepitaxial 3C-SiC films on silicon substrates are of technological interest as enablers to integrate the excellent electrical, electronic, mechanical, thermal, and epitaxial properties of bulk silicon carbide into well-established silicon technologies. One critical bottleneck of this integration is the establishment of a stable and reliable electronic junction at the heteroepitaxial interface of the n-type SiC with the silicon substrate. We have thus investigated in detail the electrical and transport properties of heteroepitaxial cubic silicon carbide films grown via different methods on low-doped and high-resistivity silicon substrates by using van der Pauw Hall and transfer length measurements as test vehicles. We have found that Si and C intermixing upon or after growth, particularly by the diffusion of carbon into the silicon matrix, creates extensive interstitial carbon traps and hampers the formation of a stable rectifying or insulating junction at the SiC/Si interface. Although a reliable p-n junction may not be realistic in the SiC/Si system, we can achieve, from a point of view of the electrical isolation of in-plane SiC structures, leakage suppression through the substrate by using a high-resistivity silicon substrate coupled with deep recess etching in between the SiC structures.

  16. Low cost silicon solar array project silicon materials task

    NASA Technical Reports Server (NTRS)

    1977-01-01

    A program was established to develop a high temperature silicon production process using existing electric arc heater technology. Silicon tetrachloride and a reductant will be injected into an arc heated mixture of hydrogen and argon. Under these high temperature conditions, a very rapid reaction is expected to occur and proceed essentially to completion, yielding silicon and gaseous sodium chloride. Techniques for high temperature separation and collection of the molten silicon will be developed using standard engineering approaches, and the salt vapor will later be electrolytically separated into its elemental constituents for recycle. Preliminary technical evaluations and economic projections indicate not only that this process appears to be feasible, but that it also has the advantages of rapid, high capacity production of good quality molten silicon at a nominal cost.

  17. Enhancement of fluorescence intensity by silicon particles and its size effect.

    PubMed

    Saitow, Ken-ichi; Suemori, Hidemi; Tamamitsu, Hironori

    2014-02-04

    Fluorescence-intensity enhancement of dye molecules was investigated using silicon submicron particles as a function of the particle size. Silicon particles with a size of 500 nm gave an enhancement factor up to 180. Measurement of scattering spectra revealed that the localized electric field at the particle enhances the fluorescence intensity.

  18. Buried oxide layer in silicon

    DOEpatents

    Sadana, Devendra Kumar; Holland, Orin Wayne

    2001-01-01

    A process for forming Silicon-On-Insulator is described incorporating the steps of ion implantation of oxygen into a silicon substrate at elevated temperature, ion implanting oxygen at a temperature below 200.degree. C. at a lower dose to form an amorphous silicon layer, and annealing steps to form a mixture of defective single crystal silicon and polycrystalline silicon or polycrystalline silicon alone and then silicon oxide from the amorphous silicon layer to form a continuous silicon oxide layer below the surface of the silicon substrate to provide an isolated superficial layer of silicon. The invention overcomes the problem of buried isolated islands of silicon oxide forming a discontinuous buried oxide layer.

  19. Characterization of a Commercial Silicon Beta Cell

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Foxe, Michael P.; Hayes, James C.; Mayer, Michael F.

    Silicon detectors are of interest for the verification of the Comprehensive Nuclear-Test-Ban Treaty (CTBT) due to their enhanced energy resolution compared to plastic scintillators beta cells. Previous work developing a figure-of-merit (FOM) for comparison of beta cells suggests that the minimum detectable activity (MDA) could be reduced by a factor of two to three with the use of silicon detectors. Silicon beta cells have been developed by CEA (France) and Lares Ltd. (Russia), with the PIPSBox developed by CEA being commercially available from Canberra for approximately $35k, but there is still uncertainty about the reproducibility of the capabilities in themore » field. PNNL is developing a high-resolution beta-gamma detector system in the shallow underground laboratory, which will utilize and characterize the operation of the PIPSBox detector. Throughout this report, we examine the capabilities of the PIPSBox as developed by CEA. The lessons learned through the testing and use of the PIPSBox will allow PNNL to strategically develop a silicon detector optimized to better suit the communities needs in the future.« less

  20. Laterally inherently thin amorphous-crystalline silicon heterojunction photovoltaic cell

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Chowdhury, Zahidur R., E-mail: zr.chowdhury@utoronto.ca; Kherani, Nazir P., E-mail: kherani@ecf.utoronto.ca

    2014-12-29

    This article reports on an amorphous-crystalline silicon heterojunction photovoltaic cell concept wherein the heterojunction regions are laterally narrow and distributed amidst a backdrop of well-passivated crystalline silicon surface. The localized amorphous-crystalline silicon heterojunctions consisting of the laterally thin emitter and back-surface field regions are precisely aligned under the metal grid-lines and bus-bars while the remaining crystalline silicon surface is passivated using the recently proposed facile grown native oxide–plasma enhanced chemical vapour deposited silicon nitride passivation scheme. The proposed cell concept mitigates parasitic optical absorption losses by relegating amorphous silicon to beneath the shadowed metallized regions and by using optically transparentmore » passivation layer. A photovoltaic conversion efficiency of 13.6% is obtained for an untextured proof-of-concept cell illuminated under AM 1.5 global spectrum; the specific cell performance parameters are V{sub OC} of 666 mV, J{sub SC} of 29.5 mA-cm{sup −2}, and fill-factor of 69.3%. Reduced parasitic absorption, predominantly in the shorter wavelength range, is confirmed with external quantum efficiency measurement.« less

  1. Contact lens induced papillary conjunctivitis with silicone hydrogel lenses.

    PubMed

    Sorbara, L; Jones, L; Williams-Lyn, D

    2009-04-01

    To describe the refitting of a soft lens wearer into a silicone hydrogel lens due to neovascularization. This change, in turn, caused contact lens induced papillary conjunctivitis (CLPC) and a further refitting was necessary. The patient was refit into a high Dk surface treated silicone hydrogel with a high modulus value. A second refitting was undertaken into a lower Dk silicone hydrogel contact lens with a lower modulus value which had no surface treatment but incorporated an internal wetting agent. A high Dk/t lens was used to resolve existing neovascularization and chronic hyperaemia. Subsequently, CLPC response occurred, possibly due to a combination of factors, resulting in irritation of the palpebral conjunctiva. This resulted in temporary lens discontinuation. A second silicone hydrogel lens was fit, along with the use of a non-preserved care system, which led to improvement and eventual resolution of the condition. High Dk silicone hydrogel lenses have shown excellent efficacy in resolving hypoxic complications such as neovascularization and hyperaemia. However, attention needs to be paid to their potential effect on the upper tarsal plate. More than one silicone hydrogel lens may be needed to help resolve these issues.

  2. Process feasibility study in support of silicon material, task 1

    NASA Technical Reports Server (NTRS)

    Li, K. Y.; Hansen, K. C.; Yaws, C. L.

    1979-01-01

    Analyses of process system properties were continued for materials involved in the alternate processes under consideration for semiconductor silicon. Primary efforts centered on physical and thermodynamic property data for dichlorosilane. The following property data are reported for dichlorosilane which is involved in processing operations for solar cell grade silicon: critical temperature, critical pressure, critical volume, critical density, acentric factor, vapor pressure, heat of vaporization, gas heat capacity, liquid heat capacity and density. Work was initiated on the assembly of a system to prepare binary gas mixtures of known proportions and to measure the thermal conductivity of these mixtures between 30 and 350 C. The binary gas mixtures include silicon source material such as silanes and halogenated silanes which are used in the production of semiconductor silicon.

  3. Silicone-containing aqueous polymer dispersions with hybrid particle structure.

    PubMed

    Kozakiewicz, Janusz; Ofat, Izabela; Trzaskowska, Joanna

    2015-09-01

    In this paper the synthesis, characterization and application of silicone-containing aqueous polymer dispersions (APD) with hybrid particle structure are reviewed based on available literature data. Advantages of synthesis of dispersions with hybrid particle structure over blending of individual dispersions are pointed out. Three main processes leading to silicone-containing hybrid APD are identified and described in detail: (1) emulsion polymerization of organic unsaturated monomers in aqueous dispersions of silicone polymers or copolymers, (2) emulsion copolymerization of unsaturated organic monomers with alkoxysilanes or polysiloxanes with unsaturated functionality and (3) emulsion polymerization of alkoxysilanes (in particular with unsaturated functionality) and/or cyclic siloxanes in organic polymer dispersions. The effect of various factors on the properties of such hybrid APD and films as well as on hybrid particles composition and morphology is presented. It is shown that core-shell morphology where silicones constitute either the core or the shell is predominant in hybrid particles. Main applications of silicone-containing hybrid APD and related hybrid particles are reviewed including (1) coatings which show specific surface properties such as enhanced water repellency or antisoiling or antigraffiti properties due to migration of silicone to the surface, and (2) impact modifiers for thermoplastics and thermosets. Other processes in which silicone-containing particles with hybrid structure can be obtained (miniemulsion polymerization, polymerization in non-aqueous media, hybridization of organic polymer and polysiloxane, emulsion polymerization of silicone monomers in silicone polymer dispersions and physical methods) are also discussed. Prospects for further developments in the area of silicone-containing hybrid APD and related hybrid particles are presented. Copyright © 2015. Published by Elsevier B.V.

  4. Amorphous silicon carbide passivating layers for crystalline-silicon-based heterojunction solar cells

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Boccard, Mathieu; Holman, Zachary C.

    Amorphous silicon enables the fabrication of very high-efficiency crystalline-silicon-based solar cells due to its combination of excellent passivation of the crystalline silicon surface and permeability to electrical charges. Yet, amongst other limitations, the passivation it provides degrades upon high-temperature processes, limiting possible post-deposition fabrication possibilities (e.g., forcing the use of low-temperature silver pastes). We investigate the potential use of intrinsic amorphous silicon carbide passivating layers to sidestep this issue. The passivation obtained using device-relevant stacks of intrinsic amorphous silicon carbide with various carbon contents and doped amorphous silicon are evaluated, and their stability upon annealing assessed, amorphous silicon carbide beingmore » shown to surpass amorphous silicon for temperatures above 300 °C. We demonstrate open-circuit voltage values over 700 mV for complete cells, and an improved temperature stability for the open-circuit voltage. Transport of electrons and holes across the hetero-interface is studied with complete cells having amorphous silicon carbide either on the hole-extracting side or on the electron-extracting side, and a better transport of holes than of electrons is shown. Also, due to slightly improved transparency, complete solar cells using an amorphous silicon carbide passivation layer on the hole-collecting side are demonstrated to show slightly better performances even prior to annealing than obtained with a standard amorphous silicon layer.« less

  5. Amorphous silicon carbide passivating layers for crystalline-silicon-based heterojunction solar cells

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Boccard, Mathieu; Holman, Zachary C.

    With this study, amorphous silicon enables the fabrication of very high-efficiency crystalline-silicon-based solar cells due to its combination of excellent passivation of the crystalline silicon surface and permeability to electrical charges. Yet, amongst other limitations, the passivation it provides degrades upon high-temperature processes, limiting possible post-deposition fabrication possibilities (e.g., forcing the use of low-temperature silver pastes). We investigate the potential use of intrinsic amorphous silicon carbide passivating layers to sidestep this issue. The passivation obtained using device-relevant stacks of intrinsic amorphous silicon carbide with various carbon contents and doped amorphous silicon are evaluated, and their stability upon annealing assessed, amorphousmore » silicon carbide being shown to surpass amorphous silicon for temperatures above 300°C. We demonstrate open-circuit voltage values over 700 mV for complete cells, and an improved temperature stability for the open-circuit voltage. Transport of electrons and holes across the hetero-interface is studied with complete cells having amorphous silicon carbide either on the hole-extracting side or on the electron-extracting side, and a better transport of holes than of electrons is shown. Also, due to slightly improved transparency, complete solar cells using an amorphous silicon carbide passivation layer on the hole-collecting side are demonstrated to show slightly better performances even prior to annealing than obtained with a standard amorphous silicon layer.« less

  6. Amorphous silicon carbide passivating layers for crystalline-silicon-based heterojunction solar cells

    DOE PAGES

    Boccard, Mathieu; Holman, Zachary C.

    2015-08-14

    With this study, amorphous silicon enables the fabrication of very high-efficiency crystalline-silicon-based solar cells due to its combination of excellent passivation of the crystalline silicon surface and permeability to electrical charges. Yet, amongst other limitations, the passivation it provides degrades upon high-temperature processes, limiting possible post-deposition fabrication possibilities (e.g., forcing the use of low-temperature silver pastes). We investigate the potential use of intrinsic amorphous silicon carbide passivating layers to sidestep this issue. The passivation obtained using device-relevant stacks of intrinsic amorphous silicon carbide with various carbon contents and doped amorphous silicon are evaluated, and their stability upon annealing assessed, amorphousmore » silicon carbide being shown to surpass amorphous silicon for temperatures above 300°C. We demonstrate open-circuit voltage values over 700 mV for complete cells, and an improved temperature stability for the open-circuit voltage. Transport of electrons and holes across the hetero-interface is studied with complete cells having amorphous silicon carbide either on the hole-extracting side or on the electron-extracting side, and a better transport of holes than of electrons is shown. Also, due to slightly improved transparency, complete solar cells using an amorphous silicon carbide passivation layer on the hole-collecting side are demonstrated to show slightly better performances even prior to annealing than obtained with a standard amorphous silicon layer.« less

  7. Nonlinear silicon photonics

    NASA Astrophysics Data System (ADS)

    Tsia, Kevin K.; Jalali, Bahram

    2010-05-01

    An intriguing optical property of silicon is that it exhibits a large third-order optical nonlinearity, with orders-ofmagnitude larger than that of silica glass in the telecommunication band. This allows efficient nonlinear optical interaction at relatively low power levels in a small footprint. Indeed, we have witnessed a stunning progress in harnessing the Raman and Kerr effects in silicon as the mechanisms for enabling chip-scale optical amplification, lasing, and wavelength conversion - functions that until recently were perceived to be beyond the reach of silicon. With all the continuous efforts developing novel techniques, nonlinear silicon photonics is expected to be able to reach even beyond the prior achievements. Instead of providing a comprehensive overview of this field, this manuscript highlights a number of new branches of nonlinear silicon photonics, which have not been fully recognized in the past. In particular, they are two-photon photovoltaic effect, mid-wave infrared (MWIR) silicon photonics, broadband Raman effects, inverse Raman scattering, and periodically-poled silicon (PePSi). These novel effects and techniques could create a new paradigm for silicon photonics and extend its utility beyond the traditionally anticipated applications.

  8. Giant enhancement of the carrier mobility in silicon nanowires with diamond coating.

    PubMed

    Fonoberov, Vladimir A; Balandin, Alexander A

    2006-11-01

    We show theoretically that the low-field carrier mobility in silicon nanowires can be greatly enhanced by embedding the nanowires within a hard material such as diamond. The electron mobility in the cylindrical silicon nanowires with 4-nm diameter, which are coated with diamond, is 2 orders of magnitude higher at 10 K and a factor of 2 higher at room temperature than the mobility in a free-standing silicon nanowire. The importance of this result for the downscaled architectures and possible silicon-carbon nanoelectronic devices is augmented by an extra benefit of diamond, a superior heat conductor, for thermal management.

  9. Compounding with Silicones.

    PubMed

    Allen, Loyd V

    2015-01-01

    Since the 1940s, methylchlorosilanes have been used to treat glassware to prevent blood from clotting. The use of silicones in pharmaceutical and medical applications has grown to where today they are used in many life-saving devices (pacemakers, hydrocephalic shunts) and pharmaceutical applications from tubing, to excipients in topical formulations, to adhesives to affix transdermal drug delivery systems, and are also being used in products as active pharmaceutical ingredients, such as antiflatulents. About 60% of today's skin-care products now contain some type of silicone where they are considered safe and are known to provide a pleasant "silky-touch," non-greasy, and non-staining feel. Silicones exhibit many useful characteristics, and the safety of these agents supports their numerous applications; their biocompatibility is partially due to their low-chemical reactivity displayed by silicones, low-surface energy, and their hydrophobicity. Silicones are used both as active ingredients and as excipients. In addition is their use for "siliconization," or surface treatment, of many parenteral packaging components. Dimethicone and silicone oil are used as lubricants on stoppers to aid machineability, in syringes to aid piston movement, or on syringe needles to reduce pain upon injection. Silicones are also useful in pharmaceutical compounding as is discussed in this artiele included with this article are in developing formulations with silicones.

  10. What controls silicon isotope fractionation during dissolution of diatom opal?

    NASA Astrophysics Data System (ADS)

    Wetzel, F.; de Souza, G. F.; Reynolds, B. C.

    2014-04-01

    The silicon isotope composition of opal frustules from photosynthesising diatoms is a promising tool for studying past changes in the marine silicon cycle, and indirectly that of carbon. Dissolution of this opal may be accompanied by silicon isotope fractionation that could disturb the pristine silicon isotope composition of diatom opal acquired in the surface ocean. It has previously been shown that dissolution of fresh and sediment trap diatom opal in seawater does fractionate silicon isotopes. However, as the mechanism of silicon isotope fractionation remained elusive, it is uncertain whether opal dissolution in general is associated with silicon isotope fractionation considering that opal chemistry and surface properties are spatially and temporally (i.e. opal of different age) diverse. In this study we dissolved sediment core diatom opal in 5 mM NaOH and found that this process is not associated with significant silicon isotope fractionation. Since no variability of the isotope effect was observed over a wide range of dissolution rates, we can rule out the suggestion that back-reactions had a significant influence on the net isotope effect. Similarly, we did not observe an impact of temperature, specific surface area, or degree of undersaturation on silicon isotope partitioning during dissolution, such that these can most likely also be ruled out as controlling factors. We discuss the potential impacts of the chemical composition of the dissolution medium and age of diatom opal on silicon isotope fractionation during dissolution. It appears most likely that the controlling mechanism of silicon isotope fractionation during dissolution is related to the reactivity, or potentially, aluminium content of the opal. Such a dependency would imply that silicon isotope fractionation during dissolution of diatom opal is spatially and temporally variable. However, since the isotope effects during dissolution are small, the silicon isotope composition of diatom opal

  11. Prolonged controlled delivery of nerve growth factor using porous silicon nanostructures.

    PubMed

    Zilony, Neta; Rosenberg, Michal; Holtzman, Liran; Schori, Hadas; Shefi, Orit; Segal, Ester

    2017-07-10

    Although nerve growth factor (NGF) is beneficial for the treatment of numerous neurological and non-neurological diseases, its therapeutic administration represents a significant challenge, due to the difficulty to locally deliver relevant doses in a safe and non-invasive manner. In this work, we employ degradable nanostructured porous silicon (PSi) films as carriers for NGF, allowing its continuous and prolonged release, while retaining its bioactivity. The PSi carriers exhibit high loading efficacy (up to 90%) of NGF and a continuous release, with no burst, over a period of>26days. The released NGF bioactivity is compared to that of free NGF in both PC12 cells and dissociated dorsal root ganglion (DRG) neurons. We show that the NGF has retained its bioactivity and induces neurite outgrowth and profound differentiation (of >50% for PC12 cells) throughout the period of release within a single administration. Thus, this proof-of-concept study demonstrates the immense therapeutic potential of these tunable carriers as long-term implants of NGF reservoirs and paves the way for new localized treatment strategies of neurodegenerative diseases. Copyright © 2016 Elsevier B.V. All rights reserved.

  12. Vibration energy harvesting using piezoelectric unimorph cantilevers with unequal piezoelectric and nonpiezoelectric lengths

    PubMed Central

    Gao, Xiaotong; Shih, Wei-Heng; Shih, Wan Y.

    2010-01-01

    We have examined a piezoelectric unimorph cantilever (PUC) with unequal piezoelectric and nonpiezoelectric lengths for vibration energy harvesting theoretically by extending the analysis of a PUC with equal piezoelectric and nonpiezoelectric lengths. The theoretical approach was validated by experiments. A case study showed that for a fixed vibration frequency, the maximum open-circuit induced voltage which was important for charge storage for later use occurred with a PUC that had a nonpiezoelectric-to-piezoelectric length ratio greater than unity, whereas the maximum power when the PUC was connected to a resistor for immediate power consumption occurred at a unity nonpiezoelectric-to-piezoelectric length ratio. PMID:21200444

  13. Vibration energy harvesting using piezoelectric unimorph cantilevers with unequal piezoelectric and nonpiezoelectric lengths.

    PubMed

    Gao, Xiaotong; Shih, Wei-Heng; Shih, Wan Y

    2010-12-06

    We have examined a piezoelectric unimorph cantilever (PUC) with unequal piezoelectric and nonpiezoelectric lengths for vibration energy harvesting theoretically by extending the analysis of a PUC with equal piezoelectric and nonpiezoelectric lengths. The theoretical approach was validated by experiments. A case study showed that for a fixed vibration frequency, the maximum open-circuit induced voltage which was important for charge storage for later use occurred with a PUC that had a nonpiezoelectric-to-piezoelectric length ratio greater than unity, whereas the maximum power when the PUC was connected to a resistor for immediate power consumption occurred at a unity nonpiezoelectric-to-piezoelectric length ratio.

  14. The effects of impurities on the performance of silicon solar cells

    NASA Technical Reports Server (NTRS)

    Yamakawa, K. A.

    1981-01-01

    The major factors that determine the tolerable concentrations of impurities in silicon feedstock for solar cells used in power generation are discussed in this report. It is concluded that a solar-grade silicon can be defined only for a specific manufacturing process. It is also concluded that it is the electrical effects, efficiency and resistivity, that are dominant in determining tolerable concentrations of impurities in the silicon feedstock. Crystal growth effects may become important when faster growth rates and larger crystal diameters are developed and used.

  15. Approximate calculation of multispar cantilever and semicantilever wings with parallel ribs under direct and indirect loading

    NASA Technical Reports Server (NTRS)

    Sanger, Eugen

    1932-01-01

    A method is presented for approximate static calculation, which is based on the customary assumption of rigid ribs, while taking into account the systematic errors in the calculation results due to this arbitrary assumption. The procedure is given in greater detail for semicantilever and cantilever wings with polygonal spar plan form and for wings under direct loading only. The last example illustrates the advantages of the use of influence lines for such wing structures and their practical interpretation.

  16. Terahertz Nanofocusing with Cantilevered Terahertz-Resonant Antenna Tips.

    PubMed

    Mastel, Stefan; Lundeberg, Mark B; Alonso-González, Pablo; Gao, Yuanda; Watanabe, Kenji; Taniguchi, Takashi; Hone, James; Koppens, Frank H L; Nikitin, Alexey Y; Hillenbrand, Rainer

    2017-11-08

    We developed THz-resonant scanning probe tips, yielding strongly enhanced and nanoscale confined THz near fields at their tip apex. The tips with length in the order of the THz wavelength (λ = 96.5 μm) were fabricated by focused ion beam (FIB) machining and attached to standard atomic force microscopy (AFM) cantilevers. Measurements of the near-field intensity at the very tip apex (25 nm radius) as a function of tip length, via graphene-based (thermoelectric) near-field detection, indicate their first and second order geometrical antenna resonances for tip length of 33 and 78 μm, respectively. On resonance, we find that the near-field intensity is enhanced by one order of magnitude compared to tips of 17 μm length (standard AFM tip length), which is corroborated by numerical simulations that further predict remarkable intensity enhancements of about 10 7 relative to the incident field. Because of the strong field enhancement and standard AFM operation of our tips, we envision manifold and straightforward future application in scattering-type THz near-field nanoscopy and THz photocurrent nanoimaging, nanoscale nonlinear THz imaging, or nanoscale control and manipulation of matter employing ultrastrong and ultrashort THz pulses.

  17. SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications.

    PubMed

    Gaitas, Angelo; Hower, Robert W

    2014-09-15

    We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromaterial removal. In the first generation of this device, the initial aperture diameter is 10 μ m and is fabricated on a silicon-on-insulator (SOI) wafer that is structurally used to define the aperture. The aperture can be reduced in size through mask design. This self-aligned process allows for patterning on the sharp tip projecting out of the fluidic plane on the cantilever and is batch fabricated, reducing the cost and time for manufacture. The initial mask, SOI device layer thickness, and the width of the base of the tip define the size of the aperture. The SU-8 micromachined cantilever includes an electrode and a force sensing mechanism. The cantilever can be easily integrated with an atomic force microscope or an optical microscope.

  18. Silicon entering through silicon utilizing organisms has biological effects in human beings

    NASA Astrophysics Data System (ADS)

    Shraddhamayananda, S.

    2012-12-01

    Except in the lungs, there is no evidence that silicon can do any harm in our body and Silicon is as essential as magnesium and calcium for us. It helps in proper activities of the bone tissues and all of the components in the human skeletal system. It can prevent osteoporosis in bones and also helps in lowering of blood pressure. Silicon can also inhibit fungal disease by physically inhibiting fungal germ tube penetration of the epidermis. Many of our foods which are associated with silicon utilizing organisms like rice, vegetables, wheat etc, contain plenty silicon, however, during processing most silicon get lost. In alternative medicine silicon is used to promote expulsion of foreign bodies from tissue, in formation of suppuration and finally expulsion of pus from abscesses. Silicon is also used to remove fibrotic lesions and scar tissue and in this way it can prevent formation of keloids. Sometimes it is also used to treat chronic otitis media, and chronic fistula,

  19. Fabrication and characterization of silicon quantum dots in Si-rich silicon carbide films.

    PubMed

    Chang, Geng-Rong; Ma, Fei; Ma, Dayan; Xu, Kewei

    2011-12-01

    Amorphous Si-rich silicon carbide films were prepared by magnetron co-sputtering and subsequently annealed at 900-1100 degrees C. After annealing at 1100 degrees C, this configuration of silicon quantum dots embedded in amorphous silicon carbide formed. X-ray photoelectron spectroscopy was used to study the chemical modulation of the films. The formation and orientation of silicon quantum dots were characterized by glancing angle X-ray diffraction, which shows that the ratio of silicon and carbon significantly influences the species of quantum dots. High-resolution transmission electron microscopy investigations directly demonstrated that the formation of silicon quantum dots is heavily dependent on the annealing temperatures and the ratio of silicon and carbide. Only the temperature of about 1100 degrees C is enough for the formation of high-density and small-size silicon quantum dots due to phase separation and thermal crystallization. Deconvolution of the first order Raman spectra shows the existence of a lower frequency peak in the range 500-505 cm(-1) corresponding to silicon quantum dots with different atom ratio of silicon and carbon.

  20. Monolithically Integrated High-β Nanowire Lasers on Silicon.

    PubMed

    Mayer, B; Janker, L; Loitsch, B; Treu, J; Kostenbader, T; Lichtmannecker, S; Reichert, T; Morkötter, S; Kaniber, M; Abstreiter, G; Gies, C; Koblmüller, G; Finley, J J

    2016-01-13

    Reliable technologies for the monolithic integration of lasers onto silicon represent the holy grail for chip-level optical interconnects. In this context, nanowires (NWs) fabricated using III-V semiconductors are of strong interest since they can be grown site-selectively on silicon using conventional epitaxial approaches. Their unique one-dimensional structure and high refractive index naturally facilitate low loss optical waveguiding and optical recirculation in the active NW-core region. However, lasing from NWs on silicon has not been achieved to date, due to the poor modal reflectivity at the NW-silicon interface. We demonstrate how, by inserting a tailored dielectric interlayer at the NW-Si interface, low-threshold single mode lasing can be achieved in vertical-cavity GaAs-AlGaAs core-shell NW lasers on silicon as measured at low temperature. By exploring the output characteristics along a detection direction parallel to the NW-axis, we measure very high spontaneous emission factors comparable to nanocavity lasers (β = 0.2) and achieve ultralow threshold pump energies ≤11 pJ/pulse. Analysis of the input-output characteristics of the NW lasers and the power dependence of the lasing emission line width demonstrate the potential for high pulsation rates ≥250 GHz. Such highly efficient nanolasers grown monolithically on silicon are highly promising for the realization of chip-level optical interconnects.