Investigation of helicon ion source extraction systems.

PubMed

Mordyk, S; Miroshnichenko, V; Shulha, D; Storizhko, V

2008-02-01

Various versions of an extraction system for a helicon ion source have been investigated in high plasma density (>10(12) cm(-3)) modes. The measurements of the plasma density were carried out with a microwave interferometer. Experiments were performed with hydrogen and helium gases. The preliminary results indicate that specially designed extractors are very promising for improving ion beam paraxial brightness.

Progress on the Development of Low Pressure High Density Plasmas on the Helicon Plasma Experiment (HPX)

NASA Astrophysics Data System (ADS)

James, R. W.; Chamberlin, A.; Azzari, P.; Crilly, P.; Emami, T.; Hopson, J.; Karama, J.; Green, A.; Paolino, R. N.; Sandri, E.; Turk, J.; Wicke, M.; Cgapl Team

2017-10-01

The small Helicon Plasma Experiment (HPX) at the Coast Guard Academy Plasma Lab (CGAPL), continues to progress toward utilizing the reputed high densities (1013 cm-3 and higher) at low pressure (.01 T) [1] of helicons, for eventual high temperature and density diagnostic development in future laboratory investigations. HPX is designed to create repeatedly stable plasmas ( 20-30 ns) induced by an RF frequency in the 10 to 70 MHz range. HPX has constructed a protected Langmuir probe where raw data will be collected, compared to the RF compensated probe and used to measure the plasma's density, temperature, and behavior during experiments. Our 2.5 J YAG laser Thomson Scattering system backed by a 32-channel Data Acquisition (DAQ) system is capable 12 bits of sampling precision at 2 MS/s for HPX plasma property investigations are being integrated into the existing diagnostics and control architecture. Progress on the construction of the RF coupling system, Helicon Mode development, and magnetic coils, along with observations from the Thomson Scattering, particle, and electromagnetic scattering diagnostics will be reported. Supported by U.S. DEPS Grant [HEL-JTO] PRWJFY17.

Development of a helicon ion source: Simulations and preliminary experiments.

PubMed

Afsharmanesh, M; Habibi, M

2018-03-01

In the present context, the extraction system of a helicon ion source has been simulated and constructed. Results of the ion source commissioning at up to 20 kV are presented as well as simulations of an ion beam extraction system. Argon current of more than 200 μA at up to 20 kV is extracted and is characterized with a Faraday cup and beam profile monitoring grid. By changing different ion source parameters such as RF power, extraction voltage, and working pressure, an ion beam with current distribution exhibiting a central core has been detected. Jump transition of ion beam current emerges at the RF power near to 700 W, which reveals that the helicon mode excitation has reached this power. Furthermore, measuring the emission line intensity of Ar ii at 434.8 nm is the other way we have used for demonstrating the mode transition from inductively coupled plasma to helicon. Due to asymmetrical longitudinal power absorption of a half-helix helicon antenna, it is used for the ion source development. The modeling of the plasma part of the ion source has been carried out using a code, HELIC. Simulations are carried out by taking into account a Gaussian radial plasma density profile and for plasma densities in range of 10 18 -10 19 m -3 . Power absorption spectrum and the excited helicon mode number are obtained. Longitudinal RF power absorption for two different antenna positions is compared. Our results indicate that positioning the antenna near to the plasma electrode is desirable for the ion beam extraction. The simulation of the extraction system was performed with the ion optical code IBSimu, making it the first helicon ion source extraction designed with the code. Ion beam emittance and Twiss parameters of the ellipse emittance are calculated at different iterations and mesh sizes, and the best values of the mesh size and iteration number have been obtained for the calculations. The simulated ion beam extraction system has been evaluated using optimized parameters such as the gap distance between electrodes, electrodes aperture, and extraction voltage. The gap distance, ground electrode aperture, and extraction voltage have been changed between 3 and 9 mm, 2-6.5 mm, and 10-35 kV in the simulations, respectively.

Development of a helicon ion source: Simulations and preliminary experiments

NASA Astrophysics Data System (ADS)

Afsharmanesh, M.; Habibi, M.

2018-03-01

In the present context, the extraction system of a helicon ion source has been simulated and constructed. Results of the ion source commissioning at up to 20 kV are presented as well as simulations of an ion beam extraction system. Argon current of more than 200 μA at up to 20 kV is extracted and is characterized with a Faraday cup and beam profile monitoring grid. By changing different ion source parameters such as RF power, extraction voltage, and working pressure, an ion beam with current distribution exhibiting a central core has been detected. Jump transition of ion beam current emerges at the RF power near to 700 W, which reveals that the helicon mode excitation has reached this power. Furthermore, measuring the emission line intensity of Ar ii at 434.8 nm is the other way we have used for demonstrating the mode transition from inductively coupled plasma to helicon. Due to asymmetrical longitudinal power absorption of a half-helix helicon antenna, it is used for the ion source development. The modeling of the plasma part of the ion source has been carried out using a code, HELIC. Simulations are carried out by taking into account a Gaussian radial plasma density profile and for plasma densities in range of 1018-1019 m-3. Power absorption spectrum and the excited helicon mode number are obtained. Longitudinal RF power absorption for two different antenna positions is compared. Our results indicate that positioning the antenna near to the plasma electrode is desirable for the ion beam extraction. The simulation of the extraction system was performed with the ion optical code IBSimu, making it the first helicon ion source extraction designed with the code. Ion beam emittance and Twiss parameters of the ellipse emittance are calculated at different iterations and mesh sizes, and the best values of the mesh size and iteration number have been obtained for the calculations. The simulated ion beam extraction system has been evaluated using optimized parameters such as the gap distance between electrodes, electrodes aperture, and extraction voltage. The gap distance, ground electrode aperture, and extraction voltage have been changed between 3 and 9 mm, 2-6.5 mm, and 10-35 kV in the simulations, respectively.

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Aleksandrov, A. F.; Petrov, A. K., E-mail: alpetrov57@gmail.com; Vavilin, K. V.

2016-03-15

Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.

Microwave Interferometric Density Measurements of a Pulsed Helicon Source

NASA Astrophysics Data System (ADS)

Scime, Ethan; Scime, Earl; Thompson, Derek

2017-10-01

The intense rf environment of a helicon plasma source is problematic for electrostatic probe measurements of plasma density, particularly at low neutral pressures. Here we present measurements of the line-integrated plasma density in a helicon plasma source using a multi-frequency (20-40 GHz) microwave interferometer. The design of the diagnostic and the data acquisition system are presented, as well as a comparison to density profiles obtained with a moveable electrostatic probe. A parametric fit to the probe profile measurements is used to determine the peak density from the microwave density measurements. This work supported by U.S. National Science Foundation Grant No. PHY-1360278.

Helicons in Unbounded Plasmas.

PubMed

Stenzel, R L; Urrutia, J M

2015-05-22

Helicons are whistler modes with helical phase fronts. They have been studied in solid state plasmas and in discharge tubes where boundaries and nonuniformities are ever present. The present work shows that helicons also exist in unbounded and uniform plasmas, thereby bridging the fields of laboratory and space plasma physics. First measurements of helicon field lines in three dimensional space are presented. Helicons with negative and positive mode numbers can propagate with equal amplitudes.

Helicon mode formation and radio frequency power deposition in a helicon-produced plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Niemi, K.; Kraemer, M.

2008-07-15

Time- and space-resolved magnetic (B-dot) probe measurements in combination with measurements of the plasma parameters were carried out to investigate the relationship between the formation and propagation of helicon modes and the radio frequency (rf) power deposition in the core of a helicon plasma. The Poynting flux and the absorbed power density are deduced from the measured rf magnetic field distribution in amplitude and phase. Special attention is devoted to the helicon absorption under linear and nonlinear conditions. The present investigations are attached to recent observations in which the nonlinear nature of the helicon wave absorption has been demonstrated bymore » showing that the strong absorption of helicon waves is correlated with parametric excitation of electrostatic fluctuations.« less

Upgrades to the MARIA Helicon Experiment at UW-Madison

NASA Astrophysics Data System (ADS)

Green, Jonathan; Hershkowitz, Noah; Schmitz, Oliver; Severn, Greg; Winters, Victoria

2016-10-01

The MARIA helicon plasma device at UW Madison is setup to investigate the neutral particle fueling of helicon discharges. Following initial results from the 668.614nm diode laser LIF system, the active spectroscopy diagnostic suite was expanded by establishing a 1.4J pulsed Nd:YAG pumped dye laser. To verify the new laser system, a comparison of measured ion velocities near a target plate was made between the diode based and dye based LIF systems. Additionally, theory and further verification of a new technique for measuring ion velocities leveraging Zeeman splitting is presented. During a campaign with <= 750W RF power, densities in the range of 1x1018 m-3 and 2 eV electron temperature were achieved with 4.1 mTorr of argon and a magnetic field of 750G. To achieve higher densities and explore the physics of neutral depletion, the available RF power was increased from 750W to 2kW, with further expansion to 4kW on a single antenna planned. For both power levels a clear helicon mode can be reliably established and its extension increases with increasing RF power. Basic plasma characterization at the higher RF power, such as electron density vs magnetic field scans, will be presented. This work was funded by the NSF CAREER Award PHY-1455210.

Pseudomagnetic helicons

NASA Astrophysics Data System (ADS)

Gorbar, E. V.; Miransky, V. A.; Shovkovy, I. A.; Sukhachov, P. O.

2017-03-01

The existence of pseudomagnetic helicons is predicted for strained Dirac and Weyl materials. The corresponding collective modes are reminiscent of the usual helicons in metals in strong magnetic fields but can exist even without a magnetic field due to a strain-induced background pseudomagnetic field. The properties of both pseudomagnetic and magnetic helicons are investigated in Weyl matter using the formalism of the consistent chiral kinetic theory. It is argued that the helicon dispersion relations are affected by the electric and chiral chemical potentials, the chiral shift, and the energy separation between the Weyl nodes. The effects of multiple pairs of Weyl nodes are also discussed. A simple setup for experimental detection of pseudomagnetic helicons is proposed.

Modeling of helicon wave propagation and the physical process of helicon plasma production

NASA Astrophysics Data System (ADS)

Isayama, Shogo; Hada, Tohru; Shinohara, Shunjiro; Tanikawa, Takao

2014-10-01

Helicon plasma is a high-density and low-temperature plasma generated by the helicon wave, and is expected to be useful for various applications. On the other hand, there still remain a number of unsolved physical issues regarding how the plasma is generated using the helicon wave. The generation involves such physical processes as wave propagation, mode conversion, and collisionless as well as collisional wave damping that leads to ionization/recombination of neutral particles. In this study, we attempt to construct a model for the helicon plasma production using numerical simulations. In particular, we will make a quantitative argument on the roles of the mode conversion from the helicon to the electrostatic Trivelpiece-Gould (TG) wave, as first proposed by Shamrai. According to his scenario, the long wavelength helicon wave linearly mode converts to the TG wave, which then dissipates rapidly due to its large wave number. On the other hand, the efficiency of the mode conversion depends strongly on the magnitudes of dissipation parameters. Particularly when the dissipation is dominant, the TG wave is no longer excited and the input helicon wave directly dissipates. In the presentation, we will discuss the mode conversion and the plasma heating using numerical simulations.

Development of a high power Helicon system for DIII-D

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tooker, Joseph F.; Nagy, Alexander; deGrassie, John

A mechanism for driving current off-axis in high beta tokamaks using fast electromagnetic waves, called Helicons, will be experimentally tested in the DIII-D tokamak. This method is calculated to be more efficient than current drive using electron cyclotron waves or neutral beam injection, and it may be well suited to reactor-like configurations. A low power (100 W) 476 MHz “combline” antenna, consisting of 12 inductively coupled, electrostatically shielded, modular resonators, was recently installed in DIII-D. Initial operation showed that the plasma operating conditions were achieved under which helicon waves can be launched. Plasma operations also showed that the location ofmore » the antenna has not reduced the performance of, or introduced excessive impurities into, the discharges produced in DIII-D. The development of a high power (1 MW) Helicon system is underway. This antenna consists of 30 modules mounted on the inside of the outer wall of the vacuum vessel slightly above the midplane. Carbon tiles around the antenna protect the antenna from thermal plasma streaming along field lines. A 1.2 MW, 476 MHz klystron system will be transferred from the Stanford Linear Accelerator to DIII-D to provide the RF input power to the antenna. Lastly, a description of the design and fabrication of high power antenna and the RF feeds, the klystron and RF distribution systems, and their installation will be presented.« less

Development of a high power Helicon system for DIII-D

DOE PAGES

Tooker, Joseph F.; Nagy, Alexander; deGrassie, John; ...

2017-03-29

A mechanism for driving current off-axis in high beta tokamaks using fast electromagnetic waves, called Helicons, will be experimentally tested in the DIII-D tokamak. This method is calculated to be more efficient than current drive using electron cyclotron waves or neutral beam injection, and it may be well suited to reactor-like configurations. A low power (100 W) 476 MHz “combline” antenna, consisting of 12 inductively coupled, electrostatically shielded, modular resonators, was recently installed in DIII-D. Initial operation showed that the plasma operating conditions were achieved under which helicon waves can be launched. Plasma operations also showed that the location ofmore » the antenna has not reduced the performance of, or introduced excessive impurities into, the discharges produced in DIII-D. The development of a high power (1 MW) Helicon system is underway. This antenna consists of 30 modules mounted on the inside of the outer wall of the vacuum vessel slightly above the midplane. Carbon tiles around the antenna protect the antenna from thermal plasma streaming along field lines. A 1.2 MW, 476 MHz klystron system will be transferred from the Stanford Linear Accelerator to DIII-D to provide the RF input power to the antenna. Lastly, a description of the design and fabrication of high power antenna and the RF feeds, the klystron and RF distribution systems, and their installation will be presented.« less

Helicon modes in uniform plasmas. III. Angular momentum

DOE Office of Scientific and Technical Information (OSTI.GOV)

Stenzel, R. L.; Urrutia, J. M.

Helicons are electromagnetic waves with helical phase fronts propagating in the whistler mode in magnetized plasmas and solids. They have similar properties to electromagnetic waves with angular momentum in free space. Helicons are circularly polarized waves carrying spin angular momentum and orbital angular momentum due to their propagation around the ambient magnetic field B{sub 0}. These properties have not been considered in the community of researchers working on helicon plasma sources, but are the topic of the present work. The present work focuses on the field topology of helicons in unbounded plasmas, not on helicon source physics. Helicons are excitedmore » in a large uniform laboratory plasma with a magnetic loop antenna whose dipole axis is aligned along or across B{sub 0}. The wave fields are measured in orthogonal planes and extended to three dimensions (3D) by interpolation. Since density and B{sub 0} are uniform, small amplitude waves from loops at different locations can be superimposed to generate complex antenna patterns. With a circular array of phase shifted loops, whistler modes with angular and axial wave propagation, i.e., helicons, are generated. Without boundaries radial propagation also arises. The azimuthal mode number m can be positive or negative while the field polarization remains right-hand circular. The conservation of energy and momentum implies that these field quantities are transferred to matter which causes damping or reflection. Wave-particle interactions with fast electrons are possible by Doppler shifted resonances. The transverse Doppler shift is demonstrated. Wave-wave interactions are also shown by showing collisions between different helicons. Whistler turbulence does not always have to be created by nonlinear wave-interactions but can also be a linear superposition of waves from random sources. In helicon collisions, the linear and/or orbital angular momenta can be canceled, which results in a great variety of field topologies. The work will be contrasted to the research on helicon plasma sources.« less

Helicon plasma ion temperature measurements and observed ion cyclotron heating in proto-MPEX

NASA Astrophysics Data System (ADS)

Beers, C. J.; Goulding, R. H.; Isler, R. C.; Martin, E. H.; Biewer, T. M.; Caneses, J. F.; Caughman, J. B. O.; Kafle, N.; Rapp, J.

2018-01-01

The Prototype-Material Plasma Exposure eXperiment (Proto-MPEX) linear plasma device is a test bed for exploring and developing plasma source concepts to be employed in the future steady-state linear device Material Plasma Exposure eXperiment (MPEX) that will study plasma-material interactions for the nuclear fusion program. The concept foresees using a helicon plasma source supplemented with electron and ion heating systems to reach necessary plasma conditions. In this paper, we discuss ion temperature measurements obtained from Doppler broadening of spectral lines from argon ion test particles. Plasmas produced with helicon heating alone have average ion temperatures downstream of the Helicon antenna in the range of 3 ± 1 eV; ion temperature increases to 10 ± 3 eV are observed with the addition of ion cyclotron heating (ICH). The temperatures are higher at the edge than the center of the plasma either with or without ICH. This type of profile is observed with electrons as well. A one-dimensional RF antenna model is used to show where heating of the plasma is expected.

Performance of a permanent-magnet helicon source at 27 and 13 MHz

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Francis F.

2012-09-15

A small helicon source is used to create dense plasma and inject it into a large chamber. A permanent magnet is used for the dc magnetic field (B-field), making the system very simple and compact. Though theory predicts that better antenna coupling will occur at 27.12 MHz, it was found that 13.56 MHz surprisingly gives even higher density due to practical effects not included in theory. Complete density n and electron temperature T{sub e} profiles are measured at three distances below the source. The plasma inside the source is also measured with a special probe, even under the antenna. Themore » density there is lower than expected because the plasma created is immediately ejected, filling the experimental chamber. The advantage of helicons over inductively coupled plasmas (with no B-field) increases with RF power. At high B-fields, edge ionization by the Trivelpiece-Gould mode can be seen. These results are useful for design of multiple-tube, large-area helicon sources for plasma etching and deposition because problems are encountered which cannot be foreseen by theory alone.« less

RF Antenna Design for a Helicon Plasma Source

NASA Astrophysics Data System (ADS)

Godden, Katarina; Stassel, Brendan; Warta, Daniel; Yep, Isaac; Hicks, Nathaniel; Munk, Jens

2017-10-01

A helicon plasma source is under development for the new Plasma Science and Engineering Laboratory at the University of Alaska Anchorage. The helicon source is of a type comprising Pyrex and stainless steel cylindrical sections, joined to an ultrahigh vacuum chamber. A radio frequency (RF) helical antenna surrounds the Pyrex chamber, as well as DC solenoidal magnetic field coils. This presentation focuses on the design of the RF helical antenna and RF matching network, such that helicon wave power is coupled to argon plasma with minimal reflected power to the RF amplifier. The amplifier output is selectable between 2-30 MHz, with forward c.w. power up to 1.5 kW. Details and computer simulation of the antenna geometry, materials, and power matching will be presented, as well as the matching network of RF transmission line, tuning capacitors, and cooling system. An initial computational study of power coupling to the plasma will also be described. Supported by U.S. NSF/DOE Partnership in Basic Plasma Science and Engineering Grant PHY-1619615, by the Alaska Space Grant Program, and by UAA Innovate 2017.

Helicon and Trivelpiece-Gould modes in uniform unbounded plasmas

NASA Astrophysics Data System (ADS)

Stenzel, R. L.; Urrutia, J. M.

2016-10-01

Helicon modes are whistler modes with angular orbital momentum caused by phase rotation in addition to the axial phase propagation. Although these modes have been associated with whistler eigenmodes in bounded plasma columns, they do exist in unbounded plasmas. Experiments in a large laboratory plasma show the wave excitation with phased antenna arrays, the wave field topology and the propagation of helicons. Low frequency whistlers can have two modes with different wavelengths at a given frequency, called helicons and Trivelpiece-Gould modes. The latter are whistler modes near the oblique cyclotron resonance. The oblique propagation is due to short radial wavelengths near the boundary. In unbounded plasmas, the oblique propagation arises from short azimuthal wavelengths. This has been observed in high-mode number helicons (e.g., m = 8). It creates wave absorption in the center of the helicon mode. The strong absorption of the wave can heat electrons and create perpendicular wave-particle interactions. These results may be of interest in space plasmas for scattering of energetic electrons and in helicon plasma sources for plasma processing and thruster applications. Work supported by NSF/DOE.

Self-consistent discharge growing model of helicon plasma

NASA Astrophysics Data System (ADS)

Isayama, Shogo; Hada, Tohru; Shinohara, Shunjiro; Tanikawa, Takao

2015-11-01

Helicon plasma is a high-density and low-temperature plasma generated by the electromagnetic (Helicon) wave excited in the plasma. It is thought to be useful for various applications including electric thrusters. Physics of helicon plasma production involves such fundamental processes as the wave propagation (dispersion relation), collisional and non-collisional wave damping, plasma heating, ionization/recombination of neutral particles, and modification of the dispersion relation by newly ionized plasma. There remain a number of unsolved physical issues such as, how the Helicon and the TG modes influence the plasma density, electron temperature and their spatial profiles. While the Helicon mode is absorbed in the bulk plasma, the TG mode is mostly absorbed near the edge of the plasma. The local power deposition in the helicon plasma is mostly balanced by collisional loss. This local power balance can give rise to the inhomogeneous electron temperature profile that leads to time evolution of density profile and dispersion relation. In our study, we construct a self-consistent model of the discharge evolution that includes the wave excitation, electron heat transfer, and diffusion of charged particles.

Transition from single to multiple axial potential structure in expanding helicon plasma

NASA Astrophysics Data System (ADS)

Ghosh, Soumen; Chattopadhyay, P. K.; Ghosh, J.; Pal, R.; Bora, D.

2017-02-01

Transition from single to multiple axial potential structure (MAPS) formation is reported in expanding helicon plasma. This transition is created by forming a cusp magnetic field at the downstream after the expansion throat. Two distinct potential drops are separated by a uniform axial potential zone. Non-uniform axial density distribution exists in expanding helicon systems. A cusp-like field nourishes both the axial density gradients sufficient enough for the formation of these two distinct potential drops. It is also shown that both single and multiple axial potential structures are observed only when both geometric and magnetic expansions closely coincide with each other. Coexistence of these two expansions at the same location enhances plasma expansion which facilitates deviation from Boltzmann distribution and violates quasi-neutrality locally.

Development Status of the Helicon Hall Thruster

DTIC Science & Technology

2009-09-15

Hall thruster , the Helicon Hall Thruster , is presented. The Helicon Hall Thruster combines the efficient ionization mechanism of a helicon source with the favorable plasma acceleration properties of a Hall thruster . Conventional Hall thrusters rely on direct current electron bombardment to ionize the flow in order to generate thrust. Electron bombardment typically results in an ionization cost that can be on the order of ten times the ionization potential, leading to reduced efficiency, particularly at low

Study of the operating parameters of a helicon plasma discharge source using PIC-MCC simulation technique

NASA Astrophysics Data System (ADS)

Jaafarian, Rokhsare; Ganjovi, Alireza; Etaati, Gholamreza

2018-01-01

In this work, a Particle in Cell-Monte Carlo Collision simulation technique is used to study the operating parameters of a typical helicon plasma source. These parameters mainly include the gas pressure, externally applied static magnetic field, the length and radius of the helicon antenna, and the frequency and voltage amplitude of the applied RF power on the helicon antenna. It is shown that, while the strong radial gradient of the formed plasma density in the proximity of the plasma surface is substantially proportional to the energy absorption from the existing Trivelpiece-Gould (TG) modes, the observed high electron temperature in the helicon source at lower static magnetic fields is significant evidence for the energy absorption from the helicon modes. Furthermore, it is found that, at higher gas pressures, both the plasma electron density and temperature are reduced. Besides, it is shown that, at higher static magnetic fields, owing to the enhancement of the energy absorption by the plasma charged species, the plasma electron density is linearly increased. Moreover, it is seen that, at the higher spatial dimensions of the antenna, both the plasma electron density and temperature are reduced. Additionally, while, for the applied frequencies of 13.56 MHz and 27.12 MHz on the helicon antenna, the TG modes appear, for the applied frequency of 18.12 MHz on the helicon antenna, the existence of helicon modes is proved. Moreover, by increasing the applied voltage amplitude on the antenna, the generation of mono-energetic electrons is more probable.

Excitation of helicons by current antennas

NASA Astrophysics Data System (ADS)

Gospodchikov, E. D.; Timofeev, A. V.

2017-06-01

Depending on the angle θ between the wave vector and the magnetic field, helicons are conventionally divided into two branches: proper helicons (H mode), propagating at small θ, and Trivelpiece-Gould waves (TG mode), propagating at large θ. The latter are close to potential waves and have a significant electric component along the external magnetic field. It is believed that it is these waves that provide electron heating in helicon discharges. There is also commonly believed that current antennas, widely used to ignite helicon discharges, excite essentially nonpotential H modes, which then transform into TG modes due to plasma inhomogeneity. In this work, it is demonstrated that electromagnetic energy can also be efficiently introduced in plasma by means of TG modes.

Electrostatic acceleration of helicon plasma using a cusped magnetic field

DOE Office of Scientific and Technical Information (OSTI.GOV)

Harada, S.; Mitsubishi Heavy Industry ltd., 16-5 Konan 2-chome, Minato-ku, Tokyo 108-8215; Baba, T.

2014-11-10

The electrostatic acceleration of helicon plasma is investigated using an electrostatic potential exerted between the ring anode at the helicon source exit and an off-axis hollow cathode in the downstream region. In the downstream region, the magnetic field for the helicon source, which is generated by a solenoid coil, is modified using permanent magnets and a yoke, forming an almost magnetic field-free region surrounded by an annular cusp field. Using a retarding potential analyzer, two primary ion energy peaks, where the lower peak corresponds to the space potential and the higher one to the ion beam, are detected in themore » field-free region. Using argon as the working gas with a helicon power of 1.5 kW and a mass flow rate of 0.21 mg/s, the ion beam energy is on the order of the applied acceleration voltage. In particular, with an acceleration voltage lower than 150 V, the ion beam energy even exceeds the applied acceleration voltage by an amount on the order of the electron thermal energy at the exit of the helicon plasma source. The ion beam energy profile strongly depends on the helicon power and the applied acceleration voltage. Since by this method the whole working gas from the helicon plasma source can, in principle, be accelerated, this device can be applied as a noble electrostatic thruster for space propulsion.« less

Electrostatic acceleration of helicon plasma using a cusped magnetic field

NASA Astrophysics Data System (ADS)

Harada, S.; Baba, T.; Uchigashima, A.; Yokota, S.; Iwakawa, A.; Sasoh, A.; Yamazaki, T.; Shimizu, H.

2014-11-01

The electrostatic acceleration of helicon plasma is investigated using an electrostatic potential exerted between the ring anode at the helicon source exit and an off-axis hollow cathode in the downstream region. In the downstream region, the magnetic field for the helicon source, which is generated by a solenoid coil, is modified using permanent magnets and a yoke, forming an almost magnetic field-free region surrounded by an annular cusp field. Using a retarding potential analyzer, two primary ion energy peaks, where the lower peak corresponds to the space potential and the higher one to the ion beam, are detected in the field-free region. Using argon as the working gas with a helicon power of 1.5 kW and a mass flow rate of 0.21 mg/s, the ion beam energy is on the order of the applied acceleration voltage. In particular, with an acceleration voltage lower than 150 V, the ion beam energy even exceeds the applied acceleration voltage by an amount on the order of the electron thermal energy at the exit of the helicon plasma source. The ion beam energy profile strongly depends on the helicon power and the applied acceleration voltage. Since by this method the whole working gas from the helicon plasma source can, in principle, be accelerated, this device can be applied as a noble electrostatic thruster for space propulsion.

Wave propagation and noncollisional heating in neutral loop and helicon discharges

DOE Office of Scientific and Technical Information (OSTI.GOV)

Celik, Y.; Crintea, D. L.; Luggenhoelscher, D.

2011-02-15

Heating mechanisms in two types of magnetized low pressure rf (13.56 MHz) discharges are investigated: a helicon discharge and a neutral loop discharge. Radial B-dot probe measurements demonstrate that the neutral loop discharge is sustained by helicon waves as well. Axial B-dot probe measurements reveal standing wave and beat patterns depending on the dc magnetic field strength and plasma density. In modes showing a strong wave damping, the plasma refractive index attains values around 100, leading to electron-wave interactions. In strongly damped modes, the radial plasma density profiles are mainly determined by power absorption of the propagating helicon wave, whereasmore » in weakly damped modes, inductive coupling dominates. Furthermore, an azimuthal diamagnetic drift is identified. Measurements of the helicon wave phase demonstrate that initial plane wave fronts are bent during their axial propagation due to the inhomogeneous density profile. A developed analytical standing wave model including Landau damping reproduces very well the damping of the axial helicon wave field. This comparison underlines the theory whereupon Landau damping of electrons traveling along the field lines at speeds close to the helicon phase velocity is the main damping mechanism in both discharges.« less

Wave propagation downstream of a high power helicon in a dipolelike magnetic field

DOE Office of Scientific and Technical Information (OSTI.GOV)

Prager, James; Winglee, Robert; Roberson, B. Race

2010-01-15

The wave propagating downstream of a high power helicon source in a diverging magnetic field was investigated experimentally. The magnetic field of the wave has been measured both axially and radially. The three-dimensional structure of the propagating wave is observed and its wavelength and phase velocity are determined. The measurements are compared to predictions from helicon theory and that of a freely propagating whistler wave. The implications of this work on the helicon as a thruster are also discussed.

High-Power Helicon Double Gun Thruster

NASA Astrophysics Data System (ADS)

Murakami, Nao

While chemical propulsion is necessary to launch a spacecraft from a planetary surface into space, electric propulsion has the potential to provide significant cost savings for the orbital transfer of payloads between planets. Due to extended wave particle interactions, a plasma thruster that can operate in the 100 kW to several MW power regime can only be attained by increasing the size of the thruster, or by using an array of plasma thrusters. The High-Power Helicon (HPH) Double Gun thruster experiment examines whether firing two helicon thrusters in parallel produces an exhaust velocity higher than the exhaust velocity of a single thruster. The scaling law that relates the downstream plasma velocity with the number of helicon antennae is derived, and compared with the experimental result. In conjunction with data analysis, two digital filtering algorithms are developed to filter out the noise from helicon antennae. The scaling law states that the downstream plasma velocity is proportional to square root of the number of helicon antennae, which is in agreement with the experimental result.

Study of the Helicon Source Operation in the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) Experiment

NASA Technical Reports Server (NTRS)

Molvig, Kim; Batishchev, Oleg

2003-01-01

During this research period the following models of the VASIMR helicon discharge have been further developed and applied to analyze the on-going VX- 10 ASPL experiment: A) 1D semi-analytical model for a mixed-collisional propellant flow B) OD power and balance model for the whole helicon discharge In this particular research period we have concentrated on the MW-level performance of the VASIMR helicon source. Favorable high-power scaling and reduced ionization costs were obtained, and presented at the VASIMR NASA review in the Fall '02. This Grant is continuation of the previous NAG9-1224 award. The research results are summarized in 14 publications; they were presented as 20+ talks at the major International Conferences and scientific seminars at the leading Academic and Research Institutions. The reported results allowed helicon discharge characterization, understanding of the several experimental observations, and helped to make predictions and propose structural modifications for the advanced VASIMR helicon source operation.

Performance evaluation of a permanent ring magnet based helicon plasma source for negative ion source research

NASA Astrophysics Data System (ADS)

Pandey, Arun; Bandyopadhyay, M.; Sudhir, Dass; Chakraborty, A.

2017-10-01

Helicon wave heated plasmas are much more efficient in terms of ionization per unit power consumed. A permanent magnet based compact helicon wave heated plasma source is developed in the Institute for Plasma Research, after carefully optimizing the geometry, the frequency of the RF power, and the magnetic field conditions. The HELicon Experiment for Negative ion-I source is the single driver helicon plasma source that is being studied for the development of a large sized, multi-driver negative hydrogen ion source. In this paper, the details about the single driver machine and the results from the characterization of the device are presented. A parametric study at different pressures and magnetic field values using a 13.56 MHz RF source has been carried out in argon plasma, as an initial step towards source characterization. A theoretical model is also presented for the particle and power balance in the plasma. The ambipolar diffusion process taking place in a magnetized helicon plasma is also discussed.

Performance evaluation of a permanent ring magnet based helicon plasma source for negative ion source research.

PubMed

Pandey, Arun; Bandyopadhyay, M; Sudhir, Dass; Chakraborty, A

2017-10-01

Helicon wave heated plasmas are much more efficient in terms of ionization per unit power consumed. A permanent magnet based compact helicon wave heated plasma source is developed in the Institute for Plasma Research, after carefully optimizing the geometry, the frequency of the RF power, and the magnetic field conditions. The HELicon Experiment for Negative ion-I source is the single driver helicon plasma source that is being studied for the development of a large sized, multi-driver negative hydrogen ion source. In this paper, the details about the single driver machine and the results from the characterization of the device are presented. A parametric study at different pressures and magnetic field values using a 13.56 MHz RF source has been carried out in argon plasma, as an initial step towards source characterization. A theoretical model is also presented for the particle and power balance in the plasma. The ambipolar diffusion process taking place in a magnetized helicon plasma is also discussed.

Berkovich Nanoindentation on AlN Thin Films.

PubMed

Jian, Sheng-Rui; Chen, Guo-Ju; Lin, Ting-Chun

2010-03-31

Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOCVD) derived Si-doped (2 × 1017 cm-3) GaN template by using the helicon sputtering system. The XTEM samples were prepared by means of focused ion beam (FIB) milling to accurately position the cross-section of the nanoindented area. The hardness and Young's modulus of AlN thin films were measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) option. The obtained values of the hardness and Young's modulus are 22 and 332 GPa, respectively. The XTEM images taken in the vicinity regions just underneath the indenter tip revealed that the multiple "pop-ins" observed in the load-displacement curve during loading are due primarily to the activities of dislocation nucleation and propagation. The absence of discontinuities in the unloading segments of load-displacement curve suggests that no pressure-induced phase transition was involved. Results obtained in this study may also have technological implications for estimating possible mechanical damages induced by the fabrication processes of making the AlN-based devices.

Understanding helicon plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tarey, R. D.; Sahu, B. B.; Ganguli, A.

2012-07-15

This paper presents a comprehensive overview of work on the helicon plasmas and also discusses various aspects of RF power deposition in such plasmas. Some of the work presented here is a review of earlier work on theoretical [A. Ganguli et al., Phys. Plasmas 14, 113503 (2007)] and experimental [A. Ganguli et al., Plasma Sources Sci. Technol. 20(1), 015021 (2011)] investigations on helicon plasmas in a conducting cylindrical waveguide for m = -1 mode. This work also presents an approach to investigate the mechanisms by which the helicon and associated Trivelpiece-Gould (TG) waves are responsible for RF power deposition inmore » Helicon discharges. Experiment design adopts the recent theory of damping and absorption of Helicon modes in conducting waveguides [A. Ganguli et al., Phys. Plasmas 14, 113503 (2007)]. The effort has also been made to detect the warm electrons, which are necessary for ionization, because Helicon discharges are of high density, low T{sub e} discharges and the tail of the bulk electron population may not have sufficient high-energy electrons. Experimental set up also comprises of the mirror magnetic field. Measurements using RF compensated Langmuir probes [A. Ganguli et al., Plasma Sources Sci. Technol. 17, 015003 (2008)], B-dot probe and computations based on the theory shows that the warm electrons at low pressure (0.2-0.3 mTorr) Helicon discharges, are because of the Landau damping of TG waves. In collisional environment, at a pressure Almost-Equal-To 10 mTorr, these high-energy electrons are due to the acceleration of bulk electrons from the neighboring regions across steep potential gradients possibly by the formation of double layers.« less

Standing helicon induced by a rapidly bent magnetic field in plasmas

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Takayama, Sho; Komuro, Atsushi; Ando, Akira; Plasma physics Team

2016-09-01

An electron energy probability function and an rf magnetic field are measured in an rf hydrogen helicon source, where axial and transverse static magnetic fields are applied to the source by solenoids and to the diffusion chamber by filter magnets, respectively. It is demonstrated that the helicon wave is reflected by the rapidly bent magnetic field and the resultant standing wave heats the electrons between the source and the magnetic filter, while the electron cooling effect by the magnetic filter is maintained. It is interpreted that the standing wave is generated by the presence of spatially localized change of a refractive index. The application to the hydrogen negative ion source used for the neutral beam injection system for fusion plasma heating is discussed. This work is partially supported by grant-in-aid for scientific research (16H04084 and 26247096) from the Japan Society for the Promotion of Science.

Helicon waves in uniform plasmas. IV. Bessel beams, Gendrin beams, and helicons

DOE Office of Scientific and Technical Information (OSTI.GOV)

Urrutia, J. M.; Stenzel, R. L.

Electromagnetic waves in the low frequency whistler mode regime are investigated experimentally and by digital data superposition. The radiation from a novel circular antenna array is shown to produce highly collimated helicon beams in a uniform unbounded plasma. The differences to Bessel beams in free space are remarked upon. Low divergence beams arise from the parallel group velocity of whistlers with phase velocity either along the guide field or at the Gendrin angle. Waves with angular momentum are produced by phasing the array in the circular direction. The differences in the field topologies for positive and negative modes numbers aremore » shown. It is also shown that in uniform plasmas, the radial amplitude profile of the waves depends on the antenna field topology. Thus, there are no helicon “eigenmodes” with radial Bessel function profiles in uniform plasmas. It is pointed out that phase measurements in helicon devices indicate radial wave propagation which is inconsistent with helicon eigenmode theory based on paraxial wave propagation. Trivelpiece-Gould modes also exist in uniform unbounded plasmas.« less

Electromagnetic waves in a topological insulator thin film stack: helicon-like wave mode and photonic band structure.

PubMed

Inoue, Jun-ichi

2013-09-09

We theoretically explore the electromagnetic modes specific to a topological insulator superlattice in which topological and conventional insulator thin films are stacked periodically. In particular, we obtain analytic formulas for low energy mode that corresponds to a helicon wave, as well as those for photonic bands. We illustrate that the system can be modeled as a stack of quantum Hall layers whose conductivity tensors alternately change signs, and then we analyze the photonic band structures. This subject is a natural extension of a previous study by Tselis et al., which took into consideration a stack of identical quantum Hall layers but their discussion was limited into a low energy mode. Thus we provide analytic formulas for photonic bands and compare their features between the two systems. Our central findings in the topological insulator superlattice are that a low energy mode corresponding to a helicon wave has linear dispersion instead of the conventional quadratic form, and that a robust gapless photonic band appears although the system considered has spacial periodicity. In addition, we demonstrate that the photonic bands agree with the numerically calculated transmission spectra.

Helicon wave-generated plasmas for negative ion beams for fusion

NASA Astrophysics Data System (ADS)

Furno, Ivo; Agnello, Riccardo; Fantz, U.; Howling, Alan; Jacquier, Remy; Marini, Claudio; Plyushchev, Gennady; Guittienne, Philippe; Simonin, Alain

2017-10-01

In the next generation of fusion reactors, such as DEMO, neutral beam injectors (NBIs) of high energy (0.8-1 MeV) deuterium atoms with high wall-plug efficiency (>50%) will be required to reach burning plasma conditions and to provide a significant amount of current drive. The present NBI system for DEMO assumes that 50 MW is delivered to the plasma by 3 NBIs. In the Siphore NBI concept, negative deuterium ions are extracted from a long, thin ion source 3 m high and 15 cm wide, accelerated and subsequently photo-neutralized. This requires the development of a new generation of negative ion sources. At the Swiss Plasma Center, a novel radio frequency helicon plasma source, based on a resonant network antenna source delivering up to 10 kW at 13.56 MHz, has been developed and is presently under study on the Resonant Antenna Ion Device (RAID). RAID is a linear device (1.9 m total length, 0.4 m diameter) and is equipped with an extensive set of diagnostics for full plasma characterization. In this work, the principles of operation of resonant antennas as helicon sources are introduced. We present absolute spectroscopy, Langmuir probe, and interferometry measurements on helicon plasmas. We characterize the performance of the source in terms of hydrogen/deuterium dissociation and negative ion production as a function of the input power. Furthermore, first results with the helicon birdcage antenna installed on the Cybele negative ion source at CEA-IRFM are presented, as a first step towards the validation of the Siphore concept.

Observation of helicon wave with m = 0 antenna in a weakly magnetized inductively coupled plasma source

NASA Astrophysics Data System (ADS)

Ellingboe, Bert; Sirse, Nishant; Moloney, Rachel; McCarthy, John

2015-09-01

Bounded whistler wave, called ``helicon wave,'' is known to produce high-density plasmas and has been exploited as a high density plasma source for many applications, including electric propulsion for spacecraft. In a helicon plasma source, an antenna wrapped around the magnetized plasma column launches a low frequency wave, ωce/2 >ωhelicon >ωce/100, in the plasma which is responsible for maintaining high density plasma. Several antenna designs have been proposed in order to match efficiently the wave modes. In our experiment, helicon wave mode is observed using an m = 0 antenna. A floating B dot probe, compensated to the capacitively coupled E field, is employed to measure axial-wave-field-profiles (z, r, and θ components) in the plasma at multiple radial positions as a function of rf power and pressure. The Bθ component of the rf-field is observed to be unaffected as the wave propagates in the axial direction. Power coupling between the antenna and the plasma column is identified and agrees with the E, H, and wave coupling regimes previously seen in M =1 antenna systems. That is, the Bz component of the rf-field is observed at low plasma density as the Bz component from the antenna penetrates the plasma. The Bz component becomes very small at medium density due to shielding at the centre of the plasma column; however, with increasing density, a sudden ``jump'' occurs in the Bz component above which a standing wave under the antenna with a propagating wave away from the antenna are observed.

Helicon normal modes in Proto-MPEX

NASA Astrophysics Data System (ADS)

Piotrowicz, P. A.; Caneses, J. F.; Green, D. L.; Goulding, R. H.; Lau, C.; Caughman, J. B. O.; Rapp, J.; Ruzic, D. N.

2018-05-01

The Proto-MPEX helicon source has been operating in a high electron density ‘helicon-mode’. Establishing plasma densities and magnetic field strengths under the antenna that allow for the formation of normal modes of the fast-wave are believed to be responsible for the ‘helicon-mode’. A 2D finite-element full-wave model of the helicon antenna on Proto-MPEX is used to identify the fast-wave normal modes responsible for the steady-state electron density profile produced by the source. We also show through the simulation that in the regions of operation in which core power deposition is maximum the slow-wave does not deposit significant power besides directly under the antenna. In the case of a simulation where a normal mode is not excited significant edge power is deposited in the mirror region. ).

Field induced heliconical structure of cholesteric liquid crystal

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lavrentovich, Oleg D.; Shiyanovsii, Sergij V.; Xiang, Jie

A diffraction grating comprises a liquid crystal (LC) cell configured to apply an electric field through a cholesteric LC material that induces the cholesteric LC material into a heliconical state with an oblique helicoid director. The applied electric field produces diffracted light from the cholesteric LC material within the visible, infrared or ultraviolet. The axis of the heliconical state is in the plane of the liquid crystal cell or perpendicular to the plane, depending on the application. A color tuning device operates with a similar heliconical state liquid crystal material but with the heliconical director axis oriented perpendicular to themore » plane of the cell. A power generator varies the strength of the applied electric field to adjust the wavelength of light reflected from the cholesteric liquid crystal material within the visible, infrared or ultraviolet.« less

Helicon normal modes in Proto-MPEX

DOE Office of Scientific and Technical Information (OSTI.GOV)

Piotrowicz, Pawel A.; Caneses, Juan F.; Green, David L.

Here, the Proto-MPEX helicon source has been operating in a high electron density 'helicon-mode'. Establishing plasma densities and magnetic field strengths under the antenna that allow for the formation of normal modes of the fast-wave are believed to be responsible for the 'helicon-mode'. A 2D finite-element full-wave model of the helicon antenna on Proto-MPEX is used to identify the fast-wave normal modes responsible for the steady-state electron density profile produced by the source. We also show through the simulation that in the regions of operation in which core power deposition is maximum the slow-wave does not deposit significant power besidesmore » directly under the antenna. In the case of a simulation where a normal mode is not excited significant edge power is deposited in the mirror region.« less

Helicon normal modes in Proto-MPEX

DOE PAGES

Piotrowicz, Pawel A.; Caneses, Juan F.; Green, David L.; ...

2018-05-22

Here, the Proto-MPEX helicon source has been operating in a high electron density 'helicon-mode'. Establishing plasma densities and magnetic field strengths under the antenna that allow for the formation of normal modes of the fast-wave are believed to be responsible for the 'helicon-mode'. A 2D finite-element full-wave model of the helicon antenna on Proto-MPEX is used to identify the fast-wave normal modes responsible for the steady-state electron density profile produced by the source. We also show through the simulation that in the regions of operation in which core power deposition is maximum the slow-wave does not deposit significant power besidesmore » directly under the antenna. In the case of a simulation where a normal mode is not excited significant edge power is deposited in the mirror region.« less

Reversal of radial glow distribution in helicon plasma induced by reversed magnetic field

NASA Astrophysics Data System (ADS)

Wang, Y.; Zhao, G.; Niu, C.; Liu, Z. W.; Ouyang, J. T.; Chen, Q.

2017-02-01

In this work, the reversal of radial glow distribution induced by reversed magnetic field is reported. Based on the Boswell antenna which is symmetric and insensitive to the magnetic field direction, it seems such a phenomenon in theory appears impossible. However, according to the diagnostic of the helicon waves by magnetic probe, it is found that the direction of magnetic field significantly affects the propagation characteristic of helicon waves, i.e., the interchange of the helicon waves at the upper and the lower half of tube was caused by reversing the direction of magnetic field. It is suggested that the variation of helicon wave against the direction of magnetic field causes the reversed radial glow distribution. The appearance of the traveling wave does not only improve the discharge strength, but also determines the transition of the discharge mode.

Modification of electromagnetic fields and plasma resistance by thermal effects in helicon plasmas

NASA Astrophysics Data System (ADS)

Kabir, M.; Niknam, A. R.

2017-05-01

The effects of the thermal motion of charged particles on physical characteristics of collisional helicon plasmas are investigated. First, the dielectric permittivity tensor of a helicon plasma is obtained by considering the thermal and collisional effects in the kinetic theory. Then, the electromagnetic wave and plasma resistance equations are presented and solved in a helicon plasma source with a Nagoya type III antenna. It is shown that by increasing the temperature of plasma electrons, the effective collision frequency is increased, and consequently, the peaks of resistance profiles are lowered and broadened.

Kinetic models for the VASIMR thruster helicon plasma source

NASA Astrophysics Data System (ADS)

Batishchev, Oleg; Molvig, Kim

2001-10-01

Helicon gas discharge [1] is widely used by industry because of its remarkable efficiency [2]. High energy and fuel efficiencies make it very attractive for space electrical propulsion applications. For example, helicon plasma source is used in the high specific impulse VASIMR [3] plasma thruster, including experimental prototypes VX-3 and upgraded VX-10 [4] configurations, which operate with hydrogen (deuterium) and helium plasmas. We have developed a set of models for the VASIMR helicon discharge. Firstly, we use zero-dimensional energy and mass balance equations to characterize partially ionized gas condition/composition. Next, we couple it to one-dimensional hybrid model [6] for gas flow in the quartz tube of the helicon. We compare hybrid model results to a purely kinetic simulation of propellant flow in gas feed + helicon source subsystem. Some of the experimental data [3-4] are explained. Lastly, we discuss full-scale kinetic modeling of coupled gas and plasmas [5-6] in the helicon discharge. [1] M.A.Lieberman, A.J.Lihtenberg, 'Principles of ..', Wiley, 1994; [2] F.F.Chen, Plas. Phys. Contr. Fus. 33, 339, 1991; [3] F.Chang-Diaz et al, Bull. APS 45 (7) 129, 2000; [4] J.Squire et al., Bull. APS 45 (7) 130, 2000; [5] O.Batishchev et al, J. Plasma Phys. 61, part II, 347, 1999; [6] O.Batishchev, K.Molvig, AIAA technical paper 2000-3754, -14p, 2001.

Radially localized helicon modes in nonuniform plasma

PubMed

Breizman; Arefiev

2000-04-24

A radial density gradient in an axisymmetric cylindrical plasma column forms a potential well for nonaxisymmetric helicon modes ( m not equal0). This paper presents an analytic description of such modes in the limit of small longitudinal wave numbers. The corresponding mode equation indicates the possibility of efficient resonant absorption of rf power in helicon discharges at unusually low frequencies.

Helicon waves in uniform plasmas. II. High m numbers

NASA Astrophysics Data System (ADS)

Stenzel, R. L.; Urrutia, J. M.

2015-09-01

Helicons are whistler modes with azimuthal wave numbers. They have been studied in solids and plasmas where boundaries play a role. The present work shows that very similar modes exist in unbounded gaseous plasmas. Instead of boundaries, the antenna properties determine the topology of the wave packets. The simplest antenna is a magnetic loop which excites m = 0 or m = 1 helicons depending on whether the dipole moment is aligned parallel or perpendicular to the ambient background magnetic field B0. While these low order helicons have been described by J. M. Urrutia and R. L. Stenzel ["Helicon modes in uniform plasmas. I. Low m modes," Phys. Plasmas 22, 092111 (2015)], the present work focuses on high order modes up to m = 8. These are excited by antenna arrays forming magnetic multipoles. Their wave magnetic field has been measured in space and time in a large and uniform laboratory plasma free of boundary effects. The observed wave topology exhibits m pairs of unique field line spirals which may have inspired the name "helicon" to this mode. All field lines converge into these nested spirals which propagate like corkscrews along B0. The field lines near the axis of helicons are perpendicular to B0 and circularly polarized as in parallel whistlers. Helical antennas couple to these transverse fields but not to the spiral fields of helicons. Using a circular antenna array of phased m = 0 loops, right or left rotating or non-rotating multipole antenna fields are generated. They excite m < 0 and m > 0 modes, showing that the plasma supports both modes equally well. The poor excitation of m < 0 modes is a characteristic of loops with dipole moment across B0. The radiation efficiency of multipole antennas has been found to decrease with m.

Negative hydrogen ions in a linear helicon plasma device

NASA Astrophysics Data System (ADS)

Corr, Cormac; Santoso, Jesse; Samuell, Cameron; Willett, Hannah; Manoharan, Rounak; O'Byrne, Sean

2015-09-01

Low-pressure negative ion sources are of crucial importance to the development of high-energy (>1 MeV) neutral beam injection systems for the ITER experimental tokamak device. Due to their high power coupling efficiency and high plasma densities, helicon devices may be able to reduce power requirements and potentially remove the need for caesium. In helicon sources, the RF power can be coupled efficiently into the plasma and it has been previously observed that the application of a small magnetic field can lead to a significant increase in the plasma density. In this work, we investigate negative ion dynamics in a high-power (20 kW) helicon plasma source. The negative ion fraction is measured by probe-based laser photodetachment, electron density and temperature are determined by a Langmuir probe and tuneable diode laser absorption spectroscopy is used to determine the density of the H(n = 2) excited atomic state and the gas temperature. The negative ion density and excited atomic hydrogen density display a maximum at a low applied magnetic field of 3 mT, while the electron temperature displays a minimum. The negative ion density can be increased by a factor of 8 with the application of the magnetic field. Spatial and temporal measurements will also be presented. The Australian Research Grants Council is acknowledged for funding.

Is the bulk mode conversion important in high density helicon plasma?

DOE Office of Scientific and Technical Information (OSTI.GOV)

Isayama, Shogo; Hada, Tohru; Shinohara, Shunjiro

2016-06-15

In a high-density helicon plasma production process, a contribution of Trivelpiece-Gould (TG) wave for surface power deposition is widely accepted. The TG wave can be excited either due to an abrupt density gradient near the plasma edge (surface conversion) or due to linear mode conversion from the helicon wave in a density gradient in the bulk region (bulk mode conversion). By numerically solving the boundary value problem of linear coupling between the helicon and the TG waves in a background with density gradient, we show that the efficiency of the bulk mode conversion strongly depends on the dissipation included inmore » the plasma, and the bulk mode conversion is important when the dissipation is small. Also, by performing FDTD simulation, we show the time evolution of energy flux associated with the helicon and the TG waves.« less

Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive discharge

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lee, Min-Hyong; Chung, Chin-Wook

2008-10-13

A mode transition from an inductive mode to a helicon mode is observed in a solenoidal inductive discharge immersed in a weak dc magnetic field. The measured electron temperature and the plasma density at the reactor radial boundary show a sudden increase when the magnetic field strength reaches the critical value and the electron cyclotron frequency exceeds the rf driving frequency. These increases are due to the electron heating by the helicon wave. Such increases in the temperature and the density are not observed at the plasma center because the helicon wave cannot propagate to the center of the solenoidalmore » type reactor unless the magnetic field is very high. These results show that the transition of the discharge from the inductive to the helicon mode occurs at the critical magnetic field strength.« less

Ion heating and short wavelength fluctuations in a helicon plasma source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Scime, E. E.; Carr, J. Jr.; Galante, M.

2013-03-15

For typical helicon source parameters, the driving antenna can couple to two plasma modes; the weakly damped 'helicon' wave, and the strongly damped, short wavelength, slow wave. Here, we present direct measurements, obtained with two different techniques, of few hundred kHz, short wavelength fluctuations that are parametrically driven by the primary antenna and localized to the edge of the plasma. The short wavelength fluctuations appear for plasma source parameters such that the driving frequency is approximately equal to the lower hybrid frequency. Measurements of the steady-state ion temperature and fluctuation amplitude radial profiles suggest that the anomalously high ion temperaturesmore » observed at the edge of helicon sources result from damping of the short wavelength fluctuations. Additional measurements of the time evolution of the ion temperature and fluctuation profiles in pulsed helicon source plasmas support the same conclusion.« less

The study of helicon plasma source.

PubMed

Miao, Ting-Ting; Zhao, Hong-Wei; Liu, Zhan-Wen; Shang, Yong; Sun, Liang-Ting; Zhang, Xue-Zhen; Zhao, Huan-Yu

2010-02-01

Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10(13) cm(-3) have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10(-3) Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.

Raman Scattering in the Magnetized Semiconductor Plasma

NASA Astrophysics Data System (ADS)

Jankauskas, Zigmantas; Kvedaras, Vygaudas; Balevičius, Saulius

2005-04-01

Radio frequency (RF) magnetoplasmic waves known as helicons will propagate in solid-state plasmas when a strong magnetic field is applied. In our device the helicons were excited by RFs (the range 100-2000 MHz) much higher than the helicon generation frequency (the main peak at 20 MHz). The excitation of helicons in this case may be described by the effect similar to the Combination Scattering (Raman effect) when a part of the high RF wave energy that passes through the active material is absorbed and re-emitted by the magnetized solid-state plasma. It is expedient to call this experimental device a Helicon Maser (HRM) and the higher frequency e/m field - a pumping field. In full analogy with the usual Raman maser (or laser) the magnetized semiconductor sample plays the role of active material and the connecting cable - the role of high quality external resonator.

Raman Scattering in the Magnetized Semiconductor Plasma

NASA Astrophysics Data System (ADS)

Jankauskas, Zigmantas; Kvedaras, Vygaudas; Balevičius, Saulius

Radio frequency (RF) magnetoplasmic waves known as helicons will propagate in solid-state plasmas when a strong magnetic field is applied. In our device the helicons were excited by RFs (the range 100-2000 MHz) much higher than the helicon generation frequency (the main peak at 20 MHz). The excitation of helicons in this case may be described by the effect similar to the Combination Scattering (Raman effect) when a part of the high RF wave energy that passes through the active material is absorbed and re-emitted by the magnetized solid-state plasma. It is expedient to call this experimental device a Helicon Maser (HRM) and the higher frequency e/m field - a pumping field. In full analogy with the usual Raman maser (or laser) the magnetized semiconductor sample plays the role of active material and the connecting cable - the role of high quality external resonator.

The discharge characteristics in nitrogen helicon plasma

NASA Astrophysics Data System (ADS)

Zhao, Gao; Wang, Huihui; Si, Xinlu; Ouyang, Jiting; Chen, Qiang; Tan, Chang

2017-12-01

Discharge characteristics of helicon plasma in nitrogen and argon-nitrogen mixtures were investigated experimentally by using a Langmuir probe, a B-dot probe, and an optical emission spectrum. Helicon wave discharge is confirmed by the changes of electron density and electromagnetic signal amplitude with the increasing RF power, which shows three discharge stages in nitrogen, corresponding to E-mode, H-mode, and W-mode discharges in helicon plasma, respectively. Discharge images in the radial cross section at different discharge modes through an intensified charge coupled device (ICCD) show a rapid increase in luminous intensity along with the RF power. When the nitrogen discharge is in the W-mode, the images show that the strongest luminance locates near the plasma boundary and no blue core appears in the axial center of tube, which is always observed in argon W-mode discharge. The "big blue" or blue core is a special character in helicon plasma, but it has not been observed in nitrogen helicon plasma. In nitrogen-argon mixtures, a weak blue core is observed in ICCD images since the nitrogen content is increased. The electric field turns to the periphery in the distribution of the radial field and the electron temperature decreases with the increasing nitrogen content, especially when the blue core disappears. The different behaviors of the electron impact and the energy consumption in nitrogen helicon plasma are suggested to be responsible for the decrease in electron energy and the change in the electric field distribution.

Design of a novel high efficiency antenna for helicon plasma sources

NASA Astrophysics Data System (ADS)

Fazelpour, S.; Chakhmachi, A.; Iraji, D.

2018-06-01

A new configuration for an antenna, which increases the absorption power and plasma density, is proposed for helicon plasma sources. The influence of the electromagnetic wave pattern symmetry on the plasma density and absorption power in a helicon plasma source with a common antenna (Nagoya) is analysed by using the standard COMSOL Multiphysics 5.3 software. In contrast to the theoretical model prediction, the electromagnetic wave does not represent a symmetric pattern for the common Nagoya antenna. In this work, a new configuration for an antenna is proposed which refines the asymmetries of the wave pattern in helicon plasma sources. The plasma parameters such as plasma density and absorption rate for a common Nagoya antenna and our proposed antenna under the same conditions are studied using simulations. In addition, the plasma density of seven operational helicon plasma source devices, having a common Nagoya antenna, is compared with the simulation results of our proposed antenna and the common Nagoya antenna. The simulation results show that the density of the plasma, which is produced by using our proposed antenna, is approximately twice in comparison to the plasma density produced by using the common Nagoya antenna. In fact, the simulation results indicate that the electric and magnetic fields symmetry of the helicon wave plays a vital role in increasing wave-particle coupling. As a result, wave-particle energy exchange and the plasma density of helicon plasma sources will be increased.

Laser Induced Fluorescence (LIF) Measurements of Neutral (ArI) and singly-ionized (ArII) Argon in a LargeScale Helicon Plasma

NASA Astrophysics Data System (ADS)

Kelly, R. F.; Fisher, D. M.; Hatch, M. W.; Gilmore, M.; Dwyer, R. H.; Meany, K.; Zhang, Y.; Desjardins, T. R.

2017-10-01

In order to investigate the role of neutral dynamics in helicon discharges in the HelCat (Helicon-Cathode) plasma device at U. New Mexico, a Laser Induced Fluorescence (LIF) system has been developed. The LIF system is based on a >250 mW, tunable diode laser with a tuning range between 680 and 700nm. For neutral Argon, the laser pumps the metastable (2P3/20) 4s level to the (2P1/20) 4p level using 696. 7352 nm light. The fluorescence radiation from decay to the (2P1/20) 4s level at 772. 6333 nm is observed. For singly ionized Argon, the laser pumps the 3s23p4(3 P)3d level to the 3s23p4(3 P)4p level using 686.3162nm light. The fluorescence radiation from the decay to the 3s23p4(3 P)4s level is observed. The system design, and velocity measurements in the axial, azimuthal and radial directions for ArI, and in the axial direction for ArII will be presented. Supported by U.S. National Science Foundation Award 1500423.

Modulational instability of helicon waves in a magnetoactive semiconductor n-InSb

NASA Astrophysics Data System (ADS)

Salimullah, M.; Ferdous, T.

1984-03-01

In this paper the modulational instabilithy of a beam of high amplitude helicon wave in a magnetoactive piezoelectric semiconductor is studied. The nonlinear response of electrons in the semiconductor plasma has been found by following the fluid model of homogeneous plasmas. The low frequency nonlinearity has been taken through the ponderomotive force on electrons, whereas the nonlinearity in the scattered helicon waves arises through the nonlinear current densities of electrons. For typical plasma parameters in n-type indium antimonide and for a considerable power density (approximately 20 kW/sq cm) of the incident helicon beam, the growth rate of the modulational instability is quite high (approximately 10 to the 7th rad/s).

The HelCat Helicon-Cathode Device at UNM

NASA Astrophysics Data System (ADS)

Cyrin, Bricette; Watts, Christopher; Gilmore, Mark; Hayes, Tiffany; Kelly, Ralph; Leach, Christopher; Lynn, Alan; Sanchez, Andrew; Xie, Shuangwei; Yan, Lincan; Zhang, Yue

2009-11-01

The HelCat helicon-cathode device is a dual-source linear plasma device for investigating a wide variety of basic plasma phenomena. HelCat is 4 m long, 50 cm diameter, with axial magnetic field < 2.2 kG. An RF helicon source is at one end of the device, and a thermionic BaO-Ni cathode is at the other end. Current research topics include the relationship of turbulence to sheared plasma flows, deterministic chaos, Alfv'en wave propagation and damping, and merging plasma interaction. We present an overview of the ongoing research, and focus on recent results of merging helicon and cathode plasma. We will present some really cool movies.

Current drive by helicon waves

DOE Office of Scientific and Technical Information (OSTI.GOV)

Paul, Manash Kumar; Bora, Dhiraj; ITER Organization, Cadarache Centre-building 519, 131008 St. Paul-Lez-Durance

2009-01-01

Helicity in the dynamo field components of helicon wave is examined during the novel study of wave induced helicity current drive. Strong poloidal asymmetry in the wave magnetic field components is observed during helicon discharges formed in a toroidal vacuum chamber of small aspect ratio. High frequency regime is chosen to increase the phase velocity of helicon waves which in turn minimizes the resonant wave-particle interactions and enhances the contribution of the nonresonant current drive mechanisms. Owing to the strong poloidal asymmetry in the wave magnetic field structures, plasma current is driven mostly by the dynamo-electric-field, which arise due tomore » the wave helicity injection by helicon waves. Small, yet finite contribution from the suppressed wave-particle resonance cannot be ruled out in the operational regime examined. A brief discussion on the parametric dependence of plasma current along with numerical estimations of nonresonant components is presented. A close agreement between the numerical estimation and measured plasma current magnitude is obtained during the present investigation.« less

Ion production cost of a gridded helicon ion thruster

NASA Astrophysics Data System (ADS)

Williams, Logan T.; Walker, Mitchell L. R.

2013-10-01

Helicon plasma sources are capable of efficiently ionizing propellants and have been considered for application in electric propulsion. However, studies that estimate the ion production cost of the helicon plasma source are limited and rely on estimates of the extracted ion current. The ion production cost of a helicon plasma source is determined using a gridded ion thruster configuration that allows accurate measurement of the ion beam current. These measurements are used in conjunction with previous characterization of the helicon plasma to create a model of the discharge plasma within the gridded thruster. The device is tested across a range of operating conditions: 343-600 W radio frequency power at 13.56 MHz, 50-250 G and 1.5 mg s-1 of argon at a pressure of 1.6 × 10-5 Torr-Ar. The ion production cost is 132-212 ± 28-46 eV/ion, driven primarily by ion loss to the walls and anode, as well as energy loss in the anode and grid sheaths.

The study of helicon plasma source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Miao Tingting; Shang Yong; Graduate University of Chinese Academy of Sciences, Beijing 100049

2010-02-15

Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10{sup 13} cm{sup -3} have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10{sup -3} Pa, and rf power of 1200 W with a frequency of 27.12more » MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.« less

Characteristics of High-Density Helicon Plasma Sources and Their Application to Electrodeless Electric Propulsion

NASA Astrophysics Data System (ADS)

Shinohara, S.; Nishida, H.; Nakamura, T.; Mishio, A.; Ishii, H.; Teshigahara, N.; Fujitsuka, H.; Waseda, S.; Tanikawa, T.; Hada, T.; Otsuka, F.; Funaki, I.; Matsuoka, T.; Shamrai, K.; Rudenko, T.

2012-10-01

High-density but low temperature helicon plasmas have been proved to be very useful for fundamental research as well as for various applications. First, we introduce our very large helicon sources [1] with a diameter up to 74 cm. For the industrial and propulsion applications, we have reduced the aspect ratio (axial length-to-diameter) down to 0.075, and examined the discharge performance and wave characteristics. Then, we discuss our small helicon sources [1] for developing new electrodeless acceleration schemes. Some experimental and theoretical results [2] by applying the rotating magnetic (or electric) fields to the helicon plasma under the divergent magnetic field will be presented, along with other propulsion schemes. In addition, an initial plasma production experiment with very small diameter will be described.[4pt] [1] S. Shinohara et al., Jpn. J. Appl. Phys. 35 (1996) 4503; Rev. Sci. Instrum. 75 (2004) 1941; Phys. Plasmas 16 (2009) 057104.[0pt] [2] S. Shinohara et al., 32th Int. Electric Propul. Conf., IEPC-2011-056, 2011.

Axial plasma detachment in helicon plasmas during a global transition due to spontaneous self organization: instabilities, bifurcation and the helicon core formation

NASA Astrophysics Data System (ADS)

Chakraborty Thakur, Saikat; Hong, Rongjie; Tynan, George

2017-10-01

We observe axial plasma detachment in a helicon plasma device that occurs simultaneously along with a spontaneous, self-organized global transition in the plasma dynamics via a transport bifurcation with strong hysteresis, at a certain B_crit. For B B_crit, the plasma exhibits steepened density and ion temperature gradients, strong shearing in the azimuthal and parallel velocities, and multiple, simultaneously present, radially separated plasma instabilities. The axial detachment also follows the same hysteresis curves associated with the transport bifurcation that led to the transition. The value of B_crit depends on the source parameters (pressure, gas flow rate, rf power etc.). This study allows access to new regimes to study plasma turbulence and transport as well as plasma detachment and helicon core formation. We find that the plasma can exist in more than one type of helicon modes.

Helicon antenna radiation patterns in a high-density hydrogen linear plasma device

NASA Astrophysics Data System (ADS)

Caneses, J. F.; Blackwell, B. D.; Piotrowicz, P.

2017-11-01

Antenna radiation patterns in the vicinity of a helicon antenna are investigated in hydrogen plasmas produced in the MAGPIE linear plasma device. Using a uniform cold-plasma full-wave code, we model the wave physics in MAGPIE and find good agreement with experimental wave measurements. We show for the first time which antenna elements in a helicon device couple most strongly to the plasma and discuss the physical mechanism that determines this effect. Helicon wavefields in the near field of the antenna are best described in terms of the group velocity and ray direction, while far from the antenna, helicon wavefields behave like plane waves and are best described in terms of eigen-modes. In addition, we present recent 2D axis-symmetric full-wave simulations of the 120 kW helicon source in ProtoMPEX [Rapp et al., IEEE Trans. Plasma Sci. 44(12), 3456-3464 (2016); Caughman et al., J. Vac. Sci. Technol. Vac. Surf. Films 35, 03E114 (2017); and Goulding et al., Fusion Sci. Technol. 72(4), 588-594 (2017)] ( n e ˜ 5 × 1019 m-3, B 0 ˜ 70 mT, and f = 13.56 MHz) where the antenna radiation patterns are evident, and we provide an interpretation of the numerical results using the ideas developed in this paper.

rf power system for thrust measurements of a helicon plasma source.

PubMed

Kieckhafer, Alexander W; Walker, Mitchell L R

2010-07-01

A rf power system has been developed, which allows the use of rf plasma devices in an electric propulsion test facility without excessive noise pollution in thruster diagnostics. Of particular importance are thrust stand measurements, which were previously impossible due to noise. Three major changes were made to the rf power system: first, the cable connection was changed from a balanced transmission line to an unbalanced coaxial line. Second, the rf power cabinet was placed remotely in order to reduce vibration-induced noise in the thrust stand. Finally, a relationship between transmission line length and rf was developed, which allows good transmission of rf power from the matching network to the helicon antenna. The modified system was tested on a thrust measurement stand and showed that rf power has no statistically significant contribution to the thrust stand measurement.

Observation of warm, higher energy electrons transiting a double layer in a helicon plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sung, Yung-Ta, E-mail: ysung2@wisc.edu; Li, Yan; Scharer, John E.

2015-03-15

Measurements of an inductive RF helicon argon plasma double layer with two temperature electron distributions including a fast (>80 eV) tail are observed at 0.17 mTorr Ar pressure. The fast, untrapped electrons observed downstream of the double layer have a higher temperature (13 eV) than the trapped (T{sub e} = 4 eV) electrons. The reduction of plasma potential and density observed in the double layer region would require an upstream temperature ten times the measured 4 eV if occurring via Boltzmann ambipolar expansion. The experimental observation in Madison helicon experiment indicates that fast electrons with substantial density fractions can be created at low helicon operating pressures.

Electron-cyclotron damping of helicon waves in low diverging magnetic fields

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lafleur, T.; Charles, C.; Boswell, R. W.

2011-04-15

Particle-in-cell simulations are performed to investigate wave propagation and absorption behavior of low-field (B{sub 0}<5 mT) helicon waves in the presence of a diverging magnetic field. The 1D electromagnetic simulations, which include experimental external magnetic field profiles, provide strong evidence for electron-cyclotron damping of helicon waves in the spatially decaying nonuniform magnetic field. For a dipole-type magnetic field configuration, the helicon waves are absence in the downstream (lower field) region of the plasma and are observed to be completely absorbed. As the magnetic field is changed slightly however, wave damping decreases, and waves are able to propagate freely downstream, confirmingmore » previous experimental measurements of this phenomenon.« less

Plasma Surface Interactions Common to Advanced Fusion Wall Materials and EUV Lithography - Lithium and Tin

NASA Astrophysics Data System (ADS)

Ruzic, D. N.; Alman, D. A.; Jurczyk, B. E.; Stubbers, R.; Coventry, M. D.; Neumann, M. J.; Olczak, W.; Qiu, H.

2004-09-01

Advanced plasma facing components (PFCs) are needed to protect walls in future high power fusion devices. In the semiconductor industry, extreme ultraviolet (EUV) sources are needed for next generation lithography. Lithium and tin are candidate materials in both areas, with liquid Li and Sn plasma material interactions being critical. The Plasma Material Interaction Group at the University of Illinois is leveraging liquid metal experimental and computational facilities to benefit both fields. The Ion surface InterAction eXperiment (IIAX) has measured liquid Li and Sn sputtering, showing an enhancement in erosion with temperature for light ion bombardment. Surface Cleaning of Optics by Plasma Exposure (SCOPE) measures erosion and damage of EUV mirror samples, and tests cleaning recipes with a helicon plasma. The Flowing LIquid surface Retention Experiment (FLIRE) measures the He and H retention in flowing liquid metals, with retention coefficients varying between 0.001 at 500 eV to 0.01 at 4000 eV.

Berkovich Nanoindentation on AlN Thin Films

PubMed Central

2010-01-01

Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOCVD) derived Si-doped (2 × 1017 cm−3) GaN template by using the helicon sputtering system. The XTEM samples were prepared by means of focused ion beam (FIB) milling to accurately position the cross-section of the nanoindented area. The hardness and Young’s modulus of AlN thin films were measured by a Berkovich nanoindenter operated with the continuous contact stiffness measurements (CSM) option. The obtained values of the hardness and Young’s modulus are 22 and 332 GPa, respectively. The XTEM images taken in the vicinity regions just underneath the indenter tip revealed that the multiple “pop-ins” observed in the load–displacement curve during loading are due primarily to the activities of dislocation nucleation and propagation. The absence of discontinuities in the unloading segments of load–displacement curve suggests that no pressure-induced phase transition was involved. Results obtained in this study may also have technological implications for estimating possible mechanical damages induced by the fabrication processes of making the AlN-based devices. PMID:20672096

Helicons in uniform fields. I. Wave diagnostics with hodograms

NASA Astrophysics Data System (ADS)

Urrutia, J. M.; Stenzel, R. L.

2018-03-01

The wave equation for whistler waves is well known and has been solved in Cartesian and cylindrical coordinates, yielding plane waves and cylindrical waves. In space plasmas, waves are usually assumed to be plane waves; in small laboratory plasmas, they are often assumed to be cylindrical "helicon" eigenmodes. Experimental observations fall in between both models. Real waves are usually bounded and may rotate like helicons. Such helicons are studied experimentally in a large laboratory plasma which is essentially a uniform, unbounded plasma. The waves are excited by loop antennas whose properties determine the field rotation and transverse dimensions. Both m = 0 and m = 1 helicon modes are produced and analyzed by measuring the wave magnetic field in three dimensional space and time. From Ampère's law and Ohm's law, the current density and electric field vectors are obtained. Hodograms for these vectors are produced. The sign ambiguity of the hodogram normal with respect to the direction of wave propagation is demonstrated. In general, electric and magnetic hodograms differ but both together yield the wave vector direction unambiguously. Vector fields of the hodogram normal yield the phase flow including phase rotation for helicons. Some helicons can have locally a linear polarization which is identified by the hodogram ellipticity. Alternatively the amplitude oscillation in time yields a measure for the wave polarization. It is shown that wave interference produces linear polarization. These observations emphasize that single point hodogram measurements are inadequate to determine the wave topology unless assuming plane waves. Observations of linear polarization indicate wave packets but not plane waves. A simple qualitative diagnostics for the wave polarization is the measurement of the magnetic field magnitude in time. Circular polarization has a constant amplitude; linear polarization results in amplitude modulations.

Observation of low magnetic field density peaks in helicon plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barada, Kshitish K.; Chattopadhyay, P. K.; Ghosh, J.

2013-04-15

Single density peak has been commonly observed in low magnetic field (<100 G) helicon discharges. In this paper, we report the observations of multiple density peaks in low magnetic field (<100 G) helicon discharges produced in the linear helicon plasma device [Barada et al., Rev. Sci. Instrum. 83, 063501 (2012)]. Experiments are carried out using argon gas with m = +1 right helical antenna operating at 13.56 MHz by varying the magnetic field from 0 G to 100 G. The plasma density varies with varying the magnetic field at constant input power and gas pressure and reaches to its peakmore » value at a magnetic field value of {approx}25 G. Another peak of smaller magnitude in density has been observed near 50 G. Measurement of amplitude and phase of the axial component of the wave using magnetic probes for two magnetic field values corresponding to the observed density peaks indicated the existence of radial modes. Measured parallel wave number together with the estimated perpendicular wave number suggests oblique mode propagation of helicon waves along the resonance cone boundary for these magnetic field values. Further, the observations of larger floating potential fluctuations measured with Langmuir probes at those magnetic field values indicate that near resonance cone boundary; these electrostatic fluctuations take energy from helicon wave and dump power to the plasma causing density peaks.« less

Collisional damping of helicon waves in a high density hydrogen linear plasma device

DOE PAGES

Caneses, Juan F.; Blackwell, Boyd D.

2016-09-28

In this paper, we investigate the propagation and damping of helicon waves along the length (~50 cm) of a helicon-produced 20 kW hydrogen plasma ( ~1-2 1019 m-3, ~1-6 eV, H2 8 mTorr) operated in a magnetic mirror configuration (antenna region: 50-200 G and mirror region: 800 G). Experimental results show the presence of traveling helicon waves (~10 G and ~ 10-15 cm) propagating away from the antenna region which become collisionally absorbed within 40 to 50 cm. We describe the use of the WKB method to calculate wave damping and provide an expression to assess its validity based onmore » experimental measurements. By comparing theory and experiment, we show that for the conditions associated with this paper classical collisions are sufficient to explain the observed wave damping along the length of the plasma column. Based on these results, we provide an expression for the scaling of helicon wave damping relevant to high density discharges and discuss the location of surfaces for plasma-material interaction studies in our device (MAGPIE).« less

On the density limit in the helicon plasma sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kotelnikov, Igor A., E-mail: I.A.Kotelnikov@inp.nsk.su

2014-12-15

Existence of the density limit in the helicon plasma sources is revisited. The low- and high-frequency regimes of a helicon plasma source operation are distinguished. In the low-frequency regime with ω<√(ω{sub ci}ω{sub ce}), the density limit is deduced from the Golant-Stix criterion of the accessibility of the lower hybrid resonance. In the high-frequency case, ω>√(ω{sub ci}ω{sub ce}), an appropriate limit is given by the Shamrai-Taranov criterion. Both these criteria are closely related to the phenomenon of the coalescence of the helicon wave with the Trivelpiece-Gould mode. We draw a conclusion that the derived density limits are not currently achieved inmore » existing devices, perhaps, because of high energy cost of gas ionization.« less

Double layer-like structures in the core of an argon helicon plasma source with uniform magnetic fields

DOE Office of Scientific and Technical Information (OSTI.GOV)

Umair Siddiqui, M., E-mail: musiddiqui@wisc.edu; Hershkowitz, Noah

2014-02-15

A hot (T{sub e} ≈ 10 eV) electron population is observed in the core of a 3 mTorr argon helicon plasma source at 500 W RF power and 900 G uniform axial magnetic field strength, 12 cm from the edge of the helicon antenna. A double layer-like structure consisting of a localized axial electric field of approximately 8 V/cm over 1–2 cm is observed adjacent to the hot electron population. The potential step generated by the electric field is shown to be large enough to trap the hot electrons. To our knowledge this is the first observation of these structures in the core of amore » helicon discharge.« less

Radiofrequency antenna for suppression of parasitic discharges in a helicon plasma thruster experiment.

PubMed

Takahashi, Kazunori

2012-08-01

A radiofrequency (rf) antenna for helicon plasma thruster experiments is developed and tested using a permanent magnets helicon plasma source immersed in a vacuum chamber. A magnetic nozzle is provided by permanent magnets arrays and an argon plasma is produced by a 13.56 MHz radiofrequency helicon-wave or inductively-coupled discharge. A parasitic discharge outside the source tube is successfully suppressed by covering the rf antenna with a ceramic ring and a grounded shield; a decrease in the ion saturation current of a Langmuir probe located outside the source tube is observed and the ion saturation current on axis increases simultaneously, compared with the case of a standard uncovered rf antenna. It is also demonstrated that the covered antenna can yield stable operation of the source.

rf power system for thrust measurements of a helicon plasma source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kieckhafer, Alexander W.; Walker, Mitchell L. R.

2010-07-15

A rf power system has been developed, which allows the use of rf plasma devices in an electric propulsion test facility without excessive noise pollution in thruster diagnostics. Of particular importance are thrust stand measurements, which were previously impossible due to noise. Three major changes were made to the rf power system: first, the cable connection was changed from a balanced transmission line to an unbalanced coaxial line. Second, the rf power cabinet was placed remotely in order to reduce vibration-induced noise in the thrust stand. Finally, a relationship between transmission line length and rf was developed, which allows goodmore » transmission of rf power from the matching network to the helicon antenna. The modified system was tested on a thrust measurement stand and showed that rf power has no statistically significant contribution to the thrust stand measurement.« less

Ion cyclotron production by a four-wave interaction with a helicon pump.

PubMed

Sutherland, O; Giles, M; Boswell, R

2005-05-27

Ion cyclotron waves at approximately 0.7 the ion gyrofrequency have been observed experimentally in the large volume helicon reactor WOMBAT. These waves are highly localized along the axis of the device where a 8 cm diameter, 2 m long. Ar II plasma column is produced. Spectral measurements reveal a four-wave interaction where energy is down-converted to the ion cyclotron mode from the helicon pump. The experimental results are explained in terms of a filamentation type instability.

Investigation of rf power absorption in the plasma of helicon ion source.

PubMed

Mordyk, S; Alexenko, O; Miroshnichenko, V; Storizhko, V; Stepanov, K; Olshansky, V

2008-02-01

The simulations of the spatial distribution of rf power absorbed in a helicon ion source reveal a correlation between the depth of penetration of rf power into the plasma and the tilt angle of lines of force of the outer magnetic field. The deeper field penetration and greater power absorption were observed at large tilt angles of the field line to the plasma surface. The evaluations as to the possibility of excitation of helicon waves in compact rf ion sources were performed.

Overview of Advanced Electromagnetic Propulsion Development at NASA Glenn Research Center

NASA Technical Reports Server (NTRS)

Pencil, Eric J.; Kamhawi, Hani; Gilland, James H.; Arrington, Lynn A.

2005-01-01

NASA Glenn Research Center s Very High Power Electric Propulsion task is sponsored by the Energetics Heritage Project. Electric propulsion technologies currently being investigated under this program include pulsed electromagnetic plasma thrusters, magnetoplasmadynamic thrusters, helicon plasma sources as well as the systems models for high power electromagnetic propulsion devices. An investigation and evaluation of pulsed electromagnetic plasma thruster performance at energy levels up to 700 Joules is underway. On-going magnetoplasmadynamic thruster experiments will investigate applied-field performance characteristics of gas-fed MPDs. Plasma characterization of helicon plasma sources will provide additional insights into the operation of this novel propulsion concept. Systems models have been developed for high power electromagnetic propulsion concepts, such as pulsed inductive thrusters and magnetoplasmadynamic thrusters to enable an evaluation of mission-optimized designs.

Simulations of Low Power DIII-D Helicon Antenna Coupling

NASA Astrophysics Data System (ADS)

Smithe, David; Jenkins, Thomas

2017-10-01

We present an overview and initial progress for a new project to model coupling of the DIII-D Helicon Antenna. We lay the necessary computational groundwork for the modeling of both low-power and high power helicon antenna operation, by constructing numerical representations for both the antenna hardware and the DIII-D plasma. CAD files containing the detailed geometry of the low power antenna hardware are imported into the VSim software's FDTD plasma model. The plasma can be represented numerically by importing EQDSK or EFIT files. In addition, approximate analytic forms for the ensuing profiles and fields are constructed to facilitate parameter scans in the various regimes of anticipated antenna operation. To verify the accuracy of the numerical plasma and antenna representations, we will then run baseline simulations of low-power antenna operation, and verify that the predictions for loading, linear coupling, and mode partitioning (i.e. into helicon and slow modes) are consistent with the measurements from the low power helicon antenna experimental campaign, as well as with other independent models. Progress on these baseline simulations will be presented, and any inconsistencies and issues that arise during this process will be identified. Support provided by DOE Grant DE-SC0017843.

Recent experimental results of KSTAR RF heating and current drive

NASA Astrophysics Data System (ADS)

Wang, S. J.; Kim, J.; Jeong, J. H.; Kim, H. J.; Joung, M.; Bae, Y. S.; Kwak, J. G.

2015-12-01

The overview of KSTAR activities on ICRH, LHCD and ECH/CD including the last experimental results and future plan aiming for long-pulse high-beta plasma will be presented. Recently we achieved reasonable coupling of ICRF power to H-mode plasma through several efforts to increase system reliability. Power balance will be discussed on this experiment. LHCD is still struggling in the low power regime. Review of antenna spectrum for the higher coupling in H-mode plasma will be tried. ECH/CD provides 41 sec, 0.8 MW of heating power to support high-performance long-pulse discharge. Also, 170 GHz ECH system is integrated with the Plasma Control System (PCS) for the feedback controlling of NTM. Status and plan of ECH/CD will be discussed. Finally, helicon current drive is being prepared for the next stage of KSTAR operation. The hardware preparation and the calculation results of helicon current drive in KSTAR plasma will be discussed.

Helicon waves in uniform plasmas. II. High m numbers

DOE Office of Scientific and Technical Information (OSTI.GOV)

Stenzel, R. L.; Urrutia, J. M.

2015-09-15

Helicons are whistler modes with azimuthal wave numbers. They have been studied in solids and plasmas where boundaries play a role. The present work shows that very similar modes exist in unbounded gaseous plasmas. Instead of boundaries, the antenna properties determine the topology of the wave packets. The simplest antenna is a magnetic loop which excites m = 0 or m = 1 helicons depending on whether the dipole moment is aligned parallel or perpendicular to the ambient background magnetic field B{sub 0}. While these low order helicons have been described by J. M. Urrutia and R. L. Stenzel [“Helicon modes in uniform plasmas.more » I. Low m modes,” Phys. Plasmas 22, 092111 (2015)], the present work focuses on high order modes up to m = 8. These are excited by antenna arrays forming magnetic multipoles. Their wave magnetic field has been measured in space and time in a large and uniform laboratory plasma free of boundary effects. The observed wave topology exhibits m pairs of unique field line spirals which may have inspired the name “helicon” to this mode. All field lines converge into these nested spirals which propagate like corkscrews along B{sub 0}. The field lines near the axis of helicons are perpendicular to B{sub 0} and circularly polarized as in parallel whistlers. Helical antennas couple to these transverse fields but not to the spiral fields of helicons. Using a circular antenna array of phased m = 0 loops, right or left rotating or non-rotating multipole antenna fields are generated. They excite m < 0 and m > 0 modes, showing that the plasma supports both modes equally well. The poor excitation of m < 0 modes is a characteristic of loops with dipole moment across B{sub 0}. The radiation efficiency of multipole antennas has been found to decrease with m.« less

Progress Towards Spectroscopic Diagnostics of Plasma Parameters and Neutral Dynamics in Helicon Plasmas

NASA Astrophysics Data System (ADS)

Green, Jonathan; Schmitz, Oliver; Severn, Greg; van Ruremonde, Lars; Winters, Victoria

2017-10-01

The MARIA device at the UW-Madison is used primarily to investigate the dynamics and fueling of neutral particles in helicon discharges. A new systematic method is in development to measure key plasma and neutral particle parameters by spectroscopic methods. The setup relies on spectroscopic line ratios for investigating basic plasma parameters and extrapolation to other states using a collisional radiative model. Active pumping using a Nd:YAG pumped dye laser is used to benchmark and correct the underlying atomic data for the collisional radiative model. First results show a matching linear dependence between electron density and laser induced fluorescence on the magnetic field above 500G. This linear dependence agrees with the helicon dispersion relation and implies MARIA can reliably support the helicon mode and support future measurements. This work was funded by the NSF CAREER award PHY-1455210.

A high power, high density helicon discharge for the plasma wakefield accelerator experiment AWAKE

NASA Astrophysics Data System (ADS)

Buttenschön, B.; Fahrenkamp, N.; Grulke, O.

2018-07-01

A plasma cell prototype for the plasma wakefield accelerator experiment AWAKE based on a helicon discharge is presented. In the 1 m long prototype module a multiple antenna helicon discharge with an rf power density of 100 MW m‑3 is established. Based on the helicon dispersion relation, a linear scaling of plasma density with magnetic field is observed for rf frequencies above the lower hybrid frequency, ω LH ≤ 0.8ω rf. Density profiles are highest on the device axis and show shallow radial gradients, thus providing a relatively constant plasma density in the center over a radial range of Δr ≈ 10 mm with less than 10% variation. Peak plasma densities up to 7 × 1020 m‑3 are transiently achieved with a reproducibility that is sufficient for AWAKE. The results are in good agreement with power balance calculations.

Generalized radially self-accelerating helicon beams.

PubMed

Vetter, Christian; Eichelkraut, Toni; Ornigotti, Marco; Szameit, Alexander

2014-10-31

We report, in theory and experiment, on a new class of optical beams that are radially self-accelerating and nondiffracting. These beams continuously evolve on spiraling trajectories while maintaining their amplitude and phase distribution in their rotating rest frame. We provide a detailed insight into the theoretical origin and characteristics of radial self-acceleration and prove our findings experimentally. As radially self-accelerating beams are nonparaxial and a solution to the full scalar Helmholtz equation, they can be implemented in many linear wave systems beyond optics, from acoustic and elastic waves to surface waves in fluids and soft matter. Our work generalized the study of classical helicon beams to a complete set of solutions for rotating complex fields.

Enhanced diamagnetic perturbations and electric currents observed downstream of the high power helicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Roberson, B. Race; Winglee, Robert; Prager, James

2011-05-15

The high power helicon (HPH) is capable of producing a high density plasma (10{sup 17}-10{sup 18} m{sup -3}) and directed ion energies greater than 20 eV that continue to increase tens of centimeters downstream of the thruster. In order to understand the coupling mechanism between the helicon antenna and the plasma outside the immediate source region, measurements were made in the plasma plume downstream from the thruster of the propagating wave magnetic field and the perturbation of the axial bulk field using a type 'R' helicon antenna. This magnetic field perturbation ({Delta}B) peaks at more than 15 G in strengthmore » downstream of the plasma source, and is 3-5 times larger than those previously reported from HPH. Taking the curl of this measured magnetic perturbation and assuming azimuthal symmetry suggests that this magnetic field is generated by a (predominantly) azimuthal current ring with a current density on the order of tens of kA m{sup -2}. At this current density the diamagnetic field is intense enough to cancel out the B{sub 0} axial magnetic field near the source region. The presence of the diamagnetic current is important as it demonstrates modification of the vacuum fields well beyond the source region and signifies the presence of a high density, collimated plasma stream. This diamagnetic current also modifies the propagation of the helicon wave, which facilitates a better understanding of coupling between the helicon wave and the resultant plasma acceleration.« less

Helicon Modes Driven by Ionosheric 0+ Ions in the Plasma Sheet Region

NASA Technical Reports Server (NTRS)

Lakhina, Gurbax S.; Tsurutani, Bruce T.

1996-01-01

It is shown that the precence of ionospheric-origin oxygen ion beams with anisotropic pressure can excite helicon modes in the near-Earth plasma shet region provided their Alfvenic Mach numbers lie in a certain range.

High Power Helicon Plasma Source for Plasma Processing

NASA Astrophysics Data System (ADS)

Prager, James; Ziemba, Timothy; Miller, Kenneth E.

2015-09-01

Eagle Harbor Technologies (EHT), Inc. is developing a high power helicon plasma source. The high power nature and pulsed neutral gas make this source unique compared to traditional helicon source. These properties produce a plasma flow along the magnetic field lines, and therefore allow the source to be decoupled from the reaction chamber. Neutral gas can be injected downstream, which allows for precision control of the ion-neutral ratio at the surface of the sample. Although operated at high power, the source has demonstrated very low impurity production. This source has applications to nanoparticle productions, surface modification, and ionized physical vapor deposition.

Investigation of Helicon discharges as RF coupling concept of negative hydrogen ion sources

NASA Astrophysics Data System (ADS)

Briefi, S.; Fantz, U.

2013-02-01

The ITER reference source for H- and D- requires a high RF input power (up to 90 kW per driver). To reduce the demands on the RF circuit, it is highly desirable to reduce the power consumption while retaining the values of the relevant plasma parameters namely the positive ion density and the atomic hydrogen density. Helicon plasmas are a promising alternative RF coupling concept but they are typically generated in long thin discharge tubes using rare gases and an RF frequency of 13.56 MHz. Hence the applicability to the ITER reference source geometry, frequency and the utilization of hydrogen/deuterium has to be proved. In this paper the strategy of the approach for using Helicon discharges for ITER reference source parameters is introduced and the first promising measurements which were carried out at a small laboratory experiment are presented. With increasing RF power a mode transition to the Helicon regime was observed for argon and argon/hydrogen mixtures. In pure hydrogen/deuterium the mode transition could not yet be achieved as the available RF power is too low. In deuterium a special feature of Helicon discharges, the socalled low field peak, could be observed at a moderate B-field of 3 mT.

A segmented multi-loop antenna for selective excitation of azimuthal mode number in a helicon plasma source.

PubMed

Shinohara, S; Tanikawa, T; Motomura, T

2014-09-01

A flat type, segmented multi-loop antenna was developed in the Tokai Helicon Device, built for producing high-density helicon plasma, with a diameter of 20 cm and an axial length of 100 cm. This antenna, composed of azimuthally splitting segments located on four different radial positions, i.e., r = 2.8, 4.8, 6.8, and 8.8 cm, can excite the azimuthal mode number m of 0, ±1, and ±2 by a proper choice of antenna feeder parts just on the rear side of the antenna. Power dependencies of the electron density ne were investigated with a radio frequency (rf) power less than 3 kW (excitation frequency ranged from 8 to 20 MHz) by the use of various types of antenna segments, and n(e) up to ~5 × 10(12) cm(-3) was obtained after the density jump from inductively coupled plasma to helicon discharges. Radial density profiles of m = 0 and ±1 modes with low and high rf powers were measured. For the cases of these modes after the density jump, the excited mode structures derived from the magnetic probe measurements were consistent with those expected from theory on helicon waves excited in the plasma.

The design of a low-cost Thomson Scattering system for use on the ORNL PhIX device

NASA Astrophysics Data System (ADS)

Biewer, T. M.; Lore, J.; Goulding, R. H.; Hillis, D. L.; Owen, L.; Rapp, J.

2012-10-01

Study of the plasma-material interface (PMI) under high power and particle flux on linear plasma devices is an active area of research that is relevant to fusion-grade toroidal devices such as ITER and DEMO. ORNL is assembling a 15 cm diameter, ˜3 m long linear machine, called the Physics Integration eXperiment (PhIX), which incorporates a helicon plasma source, electron heating, and a material target. The helicon source has demonstrated coupling of up to 100 kW of rf power, and produced ne >= 4 x 10^19 m-3 in D, and He fueled plasmas, measured with interferometry and Langmuir probes (LP). Optical emission spectroscopy was used to confirm LP measurements that Te is about 10 eV in helicon heated plasmas, which will presumably increase when electron heating is applied. Plasma parameters (ne, Te, n0) of the PhIX device will be measured with a novel, low-cost Thomson Scattering (TS) system. The data will be used to characterize the PMI regime with multiple profile measurements in front of the target. Profiles near the source and target will be used to determine the parallel transport regime via comparison to 2D fluid plasma simulations. This work was supported by the US. D.O.E. contract DE-AC05-00OR22725.

Coherence imaging for ion temperature and flow measurements in a low-temperature helicon plasma source

NASA Astrophysics Data System (ADS)

Lester, R.; Zhai, Y.; Corr, C.; Howard, J.

2016-02-01

This paper describes a coherence imaging system designed for spectroscopic Doppler measurements of ion light in a low-temperature (T e   <  10 eV) helicon-produced argon plasma. Observation of the very small Doppler broadening of the Ar II 488 nm emission line requires very high spectral resolution, or equivalently, very large interferometric optical path delay (comparable with the coherence length of the emission line). For these polarization interferometers, this can only be achieved using large thicknesses (100 mm) of birefringent crystal. This poses special design challenges including the application of field-widening techniques and the development of passive thermal stabilization of the optical phase offset. We discuss the measurement principles and the optical design of these systems and present measurements of the line-integrated emissivity, and ion flow and ion temperatures along with tomographic reconstructions of the local values, for a cylindrical low temperature helicon discharge in a linear magnetized device with downstream magnetic mirror. Key results reveal a hollow edge-peaked temperature profile (central temperature  ∼0.1 eV) and sheared rigid-body rotational flows and axial flows which are comparable with the ion thermal speed. The emission line brightness, ion temperature and azimuthal ion flows are all found to increase with increased mirror magnetic field strength.

Using AORSA to simulate helicon waves in DIII-D

NASA Astrophysics Data System (ADS)

Lau, C.; Jaeger, E. F.; Bertelli, N.; Berry, L. A.; Blazevski, D.; Green, D. L.; Murakami, M.; Park, J. M.; Pinsker, R. I.; Prater, R.

2015-12-01

Recent efforts have shown that helicon waves (fast waves at > 20ωci) may be an attractive option for driving efficient off-axis current drive during non-inductive tokamak operation for DIII-D, ITER and DEMO. For DIII-D scenarios, the ray tracing code, GENRAY, has been extensively used to study helicon current drive efficiency and location as a function of many plasma parameters. The full wave code, AORSA, which is applicable to arbitrary Larmor radius and can resolve arbitrary ion cyclotron harmonic order, has been recently used to validate the ray tracing technique at these high cyclotron harmonics. If the SOL is ignored, it will be shown that the GENRAY and AORSA calculated current drive profiles are comparable for the envisioned high beta advanced scenarios for DIII-D, where there is high single pass absorption due to electron Landau damping and minimal ion damping. AORSA is also been used to estimate possible SOL effects on helicon current drive coupling and SOL absorption due to collisional and slow wave effects.

Ion Heating and Flows in a High Power Helicon Source

NASA Astrophysics Data System (ADS)

Scime, Earl; Agnello, Riccardo; Furno, Ivo; Howling, Alan; Jacquier, Remy; Plyushchev, Gennady; Thompson, Derek

2017-10-01

We report experimental measurements of ion temperatures and flows in a high power, linear, magnetized, helicon plasma device, the Resonant Antenna Ion Device (RAID). RAID is equipped with a high power helicon source. Parallel and perpendicular ion temperatures on the order of 0.6 eV are observed for an rf power of 4 kW, suggesting that higher power helicon sources should attain ion temperatures in excess of 1 eV. The unique RAID antenna design produces broad, uniform plasma density and perpendicular ion temperature radial profiles. Measurements of the azimuthal flow indicate rigid body rotation of the plasma column of a few kHz. When configured with an expanding magnetic field, modest parallel ion flows are observed in the expansion region. The ion flows and temperatures are derived from laser induced fluorescence measurements of the Doppler resolved velocity distribution functions of argon ions. This work supported by U.S. National Science Foundation Grant No. PHY-1360278.

Coupling of RF antennas to large volume helicon plasma

NASA Astrophysics Data System (ADS)

Chang, Lei; Hu, Xinyue; Gao, Lei; Chen, Wei; Wu, Xianming; Sun, Xinfeng; Hu, Ning; Huang, Chongxiang

2018-04-01

Large volume helicon plasma sources are of particular interest for large scale semiconductor processing, high power plasma propulsion and recently plasma-material interaction under fusion conditions. This work is devoted to studying the coupling of four typical RF antennas to helicon plasma with infinite length and diameter of 0.5 m, and exploring its frequency dependence in the range of 13.56-70 MHz for coupling optimization. It is found that loop antenna is more efficient than half helix, Boswell and Nagoya III antennas for power absorption; radially parabolic density profile overwhelms Gaussian density profile in terms of antenna coupling for low-density plasma, but the superiority reverses for high-density plasma. Increasing the driving frequency results in power absorption more near plasma edge, but the overall power absorption increases with frequency. Perpendicular stream plots of wave magnetic field, wave electric field and perturbed current are also presented. This work can serve as an important reference for the experimental design of large volume helicon plasma source with high RF power.

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

NASA Astrophysics Data System (ADS)

Peiyu, JI; Jun, YU; Tianyuan, HUANG; Chenggang, JIN; Yan, YANG; Lanjian, ZHUGE; Xuemei, WU

2018-02-01

A high growth rate fabrication of diamond-like carbon (DLC) films at room temperature was achieved by helicon wave plasma chemical vapor deposition (HWP-CVD) using Ar/CH4 gas mixtures. The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy. The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe. The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed. The growth rate of the DLC films reaches a maximum value of 54 μm h-1 at the CH4 flow rate of 85 sccm, which is attributed to the higher plasma density during the helicon wave plasma discharge. The CH and H α radicals play an important role in the growth of DLC films. The results show that the H α radicals are beneficial to the formation and stabilization of C=C bond from sp2 to sp3.

Progress in the Development of a High Power Helicon Plasma Source for the Materials Plasma Exposure Experiment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goulding, Richard Howell; Caughman, John B.; Rapp, Juergen

Proto-MPEX is a linear plasma device being used to study a novel RF source concept for the planned Material Plasma Exposure eXperiment (MPEX), which will address plasma-materials interaction (PMI) for nuclear fusion reactors. Plasmas are produced using a large diameter helicon source operating at a frequency of 13.56 MHz at power levels up to 120 kW. In recent experiments the helicon source has produced deuterium plasmas with densities up to ~6 × 1019 m–3 measured at a location 2 m downstream from the antenna and 0.4 m from the target. Previous plasma production experiments on Proto-MPEX have generated lower densitymore » plasmas with hollow electron temperature profiles and target power deposition peaked far off axis. The latest experiments have produced flat Te profiles with a large portion of the power deposited on the target near the axis. This and other evidence points to the excitation of a helicon mode in this case.« less

Walking Robot Locomotion System Conception

NASA Astrophysics Data System (ADS)

Ignatova, D.; Abadjieva, E.; Abadjiev, V.; Vatzkitchev, Al.

2014-09-01

This work is a brief analysis on the application and perspective of using the walking robots in different areas in practice. The most common characteristics of walking four legs robots are presented here. The specific features of the applied actuators in walking mechanisms are also shown in the article. The experience of Institute of Mechanics - BAS is illustrated in creation of Spiroid and Helicon1 gears and their assembly in actuation of studied robots. Loading on joints reductors of robot legs is modelled, when the geometrical and the walking parameters of the studied robot are preliminary defined. The obtained results are purposed for designing the control of the loading of reductor type Helicon in the legs of the robot, when it is experimentally tested.

Electrically tunable laser based on heliconical cholesteric (Conference Presentation)

NASA Astrophysics Data System (ADS)

Xiang, Jie; Varanytsia, Andrii; Minkowski, Fred; Paterson, Daniel A.; Imrie, Corrie T.; Lavrentovich, Oleg D.; Palffy-Muhoray, Peter

2016-09-01

STUDENT CONTRIBUTION: Cholesteric liquid crystals (CLC) self-assemble into a periodic supramolecular helical structure with properties of a one-dimensional photonic crystal. The CLCs doped with a fluorescent dye and optical pump enable a distributed feedback cavity and lasing [1]. Although lasing was observed in range of wavelength from near UV to near IR, a practical method of tuning of emission wavelength from a dye-doped CLC without structural destruction of a helix is not demonstrated yet. In this work, we demonstrate an electrically tunable dye-doped CLC laser based on the so-called oblique helicoidal, or heliconical, CLC state [2,3]. In this state, the molecules twist around the helicoidal axis, making an angle smaller than 90 degrees with the axis. Molecular tilt makes the heliconical structure different from the regular CLC (in which the molecules are perpendicular to the axis) and enable electric tunability [2,3]. An electric field applied parallel to the heliconical axis changes the pitch but does not realign the axis. When the field increases, the pitch decreases. As a result, the selective reflection band and a lasing wavelength move towards shorter wavelength. Using heliconical CLC and two laser dyes DCM and LD688, we demonstrate effective tuning of the laser emission wavelength from 574 nm to 722 nm. With appropriate laser dyes, the spectrum can be extended from near UV to near IR. Efficient electric tuning in the broad spectral range and small size of the heliconical cholesteric lasers makes them potentially useful for optical and biomedical applications. [1] P. Palffy-Muhoay, W.Y. Cao, M. Moreira, B. Taheri, A. Munoz, Photonics and lasing in liquid crystal [2] J. Xiang, S.V. Shiyanovskii, C.T. Imrie, O.D. Lavrentovich, Electrooptic Response of Chiral Nematic Liquid Crystals with Oblique Helicoidal Director, Phys Rev Lett, 112 (2014) 217801. [3] J. Xiang, Y.N. Li, Q. Li, D.A. Paterson, J.M.D. Storey, C.T. Imrie, O.D. Lavrentovich, Electrically Tunable Selective Reflection of Light from Ultraviolet to Visible and Infrared by Heliconical Cholesterics, Adv Mater, 27 (2015) 3014-3018.

Standing Helicon Wave Induced by a Rapidly Bent Magnetic Field in Plasmas.

PubMed

Takahashi, Kazunori; Takayama, Sho; Komuro, Atsushi; Ando, Akira

2016-04-01

An electron energy probability function and a rf magnetic field are measured in a rf hydrogen helicon source, where axial and transverse static magnetic fields are applied to the source by solenoids and to the diffusion chamber by filter magnets, respectively. It is demonstrated that the helicon wave is reflected by the rapidly bent magnetic field and the resultant standing wave heats the electrons between the source and the magnetic filter, while the electron cooling effect by the magnetic filter is maintained. It is interpreted that the standing wave is generated by the presence of a spatially localized change of a refractive index.

Standing Helicon Wave Induced by a Rapidly Bent Magnetic Field in Plasmas

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Takayama, Sho; Komuro, Atsushi; Ando, Akira

2016-04-01

An electron energy probability function and a rf magnetic field are measured in a rf hydrogen helicon source, where axial and transverse static magnetic fields are applied to the source by solenoids and to the diffusion chamber by filter magnets, respectively. It is demonstrated that the helicon wave is reflected by the rapidly bent magnetic field and the resultant standing wave heats the electrons between the source and the magnetic filter, while the electron cooling effect by the magnetic filter is maintained. It is interpreted that the standing wave is generated by the presence of a spatially localized change of a refractive index.

A segmented multi-loop antenna for selective excitation of azimuthal mode number in a helicon plasma source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Shinohara, S., E-mail: sshinoha@cc.tuat.ac.jp; Tanikawa, T.; Motomura, T.

2014-09-15

A flat type, segmented multi-loop antenna was developed in the Tokai Helicon Device, built for producing high-density helicon plasma, with a diameter of 20 cm and an axial length of 100 cm. This antenna, composed of azimuthally splitting segments located on four different radial positions, i.e., r = 2.8, 4.8, 6.8, and 8.8 cm, can excite the azimuthal mode number m of 0, ±1, and ±2 by a proper choice of antenna feeder parts just on the rear side of the antenna. Power dependencies of the electron density n{sub e} were investigated with a radio frequency (rf) power less thanmore » 3 kW (excitation frequency ranged from 8 to 20 MHz) by the use of various types of antenna segments, and n{sub e} up to ∼5 × 10{sup 12} cm{sup −3} was obtained after the density jump from inductively coupled plasma to helicon discharges. Radial density profiles of m = 0 and ±1 modes with low and high rf powers were measured. For the cases of these modes after the density jump, the excited mode structures derived from the magnetic probe measurements were consistent with those expected from theory on helicon waves excited in the plasma.« less

Plasma production by helicon and slow waves.

PubMed

Sakawa, Youichi; Kunimatsu, Hiroyuki; Kikuchi, Hideki; Fukui, Yasuaki; Shoji, Tatsuo

2003-03-14

The observation of slow-wave sustained (SW) discharge in a whistler- or helicon-wave range of frequency is made using high-frequency and very-high-frequency bands of rf. The SW discharge occurs at an extremely low rf power and plasma density, which are lower than a capacitive-coupling discharge region.

The HelCat dual-source plasma device.

PubMed

Lynn, Alan G; Gilmore, Mark; Watts, Christopher; Herrea, Janis; Kelly, Ralph; Will, Steve; Xie, Shuangwei; Yan, Lincan; Zhang, Yue

2009-10-01

The HelCat (Helicon-Cathode) device has been constructed to support a broad range of basic plasma science experiments relevant to the areas of solar physics, laboratory astrophysics, plasma nonlinear dynamics, and turbulence. These research topics require a relatively large plasma source capable of operating over a broad region of parameter space with a plasma duration up to at least several milliseconds. To achieve these parameters a novel dual-source system was developed utilizing both helicon and thermionic cathode sources. Plasma parameters of n(e) approximately 0.5-50 x 10(18) m(-3) and T(e) approximately 3-12 eV allow access to a wide range of collisionalities important to the research. The HelCat device and initial characterization of plasma behavior during dual-source operation are described.

Helicon wave excitation to produce energetic electrons for manufacturing semiconductors

DOEpatents

Molvik, Arthur W.; Ellingboe, Albert R.

1998-01-01

A helicon plasma source is controlled by varying the axial magnetic field or rf power controlling the formation of the helicon wave. An energetic electron current is carried on the wave when the magnetic field is 90 G; but there is minimal energetic electron current when the magnetic field is 100 G in one particular plasma source. Similar performance can be expected from other helicon sources by properly adjusting the magnetic field and power to the particular geometry. This control for adjusting the production of energetic electrons can be used in the semiconductor and thin-film manufacture process. By applying energetic electrons to the insulator layer, such as silicon oxide, etching ions are attracted to the insulator layer and bombard the insulator layer at higher energy than areas that have not accumulated the energetic electrons. Thus, silicon and metal layers, which can neutralize the energetic electron currents will etch at a slower or non-existent rate. This procedure is especially advantageous in the multilayer semiconductor manufacturing because trenches can be formed that are in the range of 0.18-0.35 mm or less.

Direct measurement of the transition from edge to core power coupling in a light-ion helicon source

NASA Astrophysics Data System (ADS)

Piotrowicz, P. A.; Caneses, J. F.; Showers, M. A.; Green, D. L.; Goulding, R. H.; Caughman, J. B. O.; Biewer, T. M.; Rapp, J.; Ruzic, D. N.

2018-05-01

We present time-resolved measurements of an edge-to-core power transition in a light-ion (deuterium) helicon discharge in the form of infra-red camera imaging of a thin stainless steel target plate on the Proto-Material Exposure eXperiment device. The time-resolved images measure the two-dimensional distribution of power deposition in the helicon discharge. The discharge displays a mode transition characterized by a significant increase in the on-axis electron density and core power coupling, suppression of edge power coupling, and the formation of a fast-wave radial eigenmode. Although the self-consistent mechanism that drives this transition is not yet understood, the edge-to-core power transition displays characteristics that are consistent with the discharge entering a slow-wave anti-resonant regime. RF magnetic field measurements made across the plasma column, together with the power deposition results, provide direct evidence to support the suppression of the slow-wave in favor of core plasma production by the fast-wave in a light-ion helicon source.

Helicons, History, High Technology and Heliacs

NASA Astrophysics Data System (ADS)

Boswell, Rod

1998-11-01

Helicon waves depend basically on the Hall effect and propagate between the ion and electron gyro frequencies: they are whistlers masquerading under another name hence their history goes back to the great war and subsequently involved such people as Appleton, Hartree and Storey. Considerable experimental and theoretical research was carried out on linear propagation during the 1960's and at the end of the decade it was discovered that the wave could actually heat the plasma electrons and increase the ionisation rate considerably. Nothing much happened during the 1970's but in the early 1980's it was realised that this high density source could be used for processing thin films and an increasing number of papers were published, which continues to this day. The first experiments on using helicons to create and heat toroidal plasmas were carried out at the end of the 1980's in a small heliac. Recent experiments with helicon excitation in the large heliac H1 at the ANU have shown that the ion temperature increases with the wave power. This mystery is being actively investigated.

Helicon wave excitation to produce energetic electrons for manufacturing semiconductors

DOEpatents

Molvik, A.W.; Ellingboe, A.R.

1998-10-20

A helicon plasma source is controlled by varying the axial magnetic field or rf power controlling the formation of the helicon wave. An energetic electron current is carried on the wave when the magnetic field is 90 G; but there is minimal energetic electron current when the magnetic field is 100 G in one particular plasma source. Similar performance can be expected from other helicon sources by properly adjusting the magnetic field and power to the particular geometry. This control for adjusting the production of energetic electrons can be used in the semiconductor and thin-film manufacture process. By applying energetic electrons to the insulator layer, such as silicon oxide, etching ions are attracted to the insulator layer and bombard the insulator layer at higher energy than areas that have not accumulated the energetic electrons. Thus, silicon and metal layers, which can neutralize the energetic electron currents will etch at a slower or non-existent rate. This procedure is especially advantageous in the multilayer semiconductor manufacturing because trenches can be formed that are in the range of 0.18--0.35 mm or less. 16 figs.

Using AORSA to simulate helicon waves in DIII-D

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lau, C., E-mail: lauch@ornl.gov; Blazevski, D.; Green, D. L.

2015-12-10

Recent efforts have shown that helicon waves (fast waves at > 20ω{sub ci}) may be an attractive option for driving efficient off-axis current drive during non-inductive tokamak operation for DIII-D, ITER and DEMO. For DIII-D scenarios, the ray tracing code, GENRAY, has been extensively used to study helicon current drive efficiency and location as a function of many plasma parameters. The full wave code, AORSA, which is applicable to arbitrary Larmor radius and can resolve arbitrary ion cyclotron harmonic order, has been recently used to validate the ray tracing technique at these high cyclotron harmonics. If the SOL is ignored,more » it will be shown that the GENRAY and AORSA calculated current drive profiles are comparable for the envisioned high beta advanced scenarios for DIII-D, where there is high single pass absorption due to electron Landau damping and minimal ion damping. AORSA is also been used to estimate possible SOL effects on helicon current drive coupling and SOL absorption due to collisional and slow wave effects.« less

Helicon Plasma Injector and Ion Cyclotron Acceleration Development in the VASIMR Experiment

NASA Technical Reports Server (NTRS)

Squire, Jared P.; Chang, Franklin R.; Jacobson, Verlin T.; McCaskill, Greg E.; Bengtson, Roger D.; Goulding, Richard H.

2000-01-01

In the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) radio frequency (rf) waves both produce the plasma and then accelerate the ions. The plasma production is done by action of helicon waves. These waves are circular polarized waves in the direction of the electron gyromotion. The ion acceleration is performed by ion cyclotron resonant frequency (ICRF) acceleration. The Advanced Space Propulsion Laboratory (ASPL) is actively developing efficient helicon plasma production and ICRF acceleration. The VASIMR experimental device at the ASPL is called VX-10. It is configured to demonstrate the plasma production and acceleration at the 10kW level to support a space flight demonstration design. The VX-10 consists of three electromagnets integrated into a vacuum chamber that produce magnetic fields up to 0.5 Tesla. Magnetic field shaping is achieved by independent magnet current control and placement of the magnets. We have generated both helium and hydrogen high density (>10(exp 18) cu m) discharges with the helicon source. ICRF experiments are underway. This paper describes the VX-10 device, presents recent results and discusses future plans.

Using AORSA to simulate helicon waves in DIII-D

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lau, Cornwall H; Jaeger, E. F.; Bertelli, Nicola

2015-01-01

Recent efforts have shown that helicon waves (fast waves at >20 omega(ci)) may be an attractive option for driving efficient off-axis current drive during non-inductive tokamak operation for DIII-D, ITER and DEMO. For DIII-D scenarios, the ray tracing code, GENRAY, has been extensively used to study helicon current drive efficiency and location as a function of many plasma parameters. The full wave code, AORSA, which is applicable to arbitrary Larmor radius and can resolve arbitrary ion cyclotron harmonic order, has been recently used to validate the ray tracing technique at these high cyclotron harmonics. If the SOL is ignored, itmore » will be shown that the GENRAY and AORSA calculated current drive profiles are comparable for the envisioned high beta advanced scenarios for DIII-D, where there is high single pass absorption due to electron Landau damping and minimal ion damping. AORSA is also been used to estimate possible SOL effects on helicon current drive coupling and SOL absorption due to collisional and slow wave effects.« less

Development of high-density helicon plasma sources and their applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

Shinohara, Shunjiro; Hada, Tohru; Motomura, Taisei

2009-05-15

We report on the development of unique, high-density helicon plasma sources and describe their applications. Characterization of one of the largest helicon plasma sources yet constructed is made. Scalings of the particle production efficiency are derived from various plasma production devices in open literature and our own data from long and short cylinder devices, i.e., high and low values of the aspect ratio A (the ratio of the axial length to the diameter), considering the power balance in the framework of a simple diffusion model. A high plasma production efficiency is demonstrated, and we clarify the structures of the excitedmore » waves in the low A region down to 0.075 (the large device diameter of 73.8 cm with the axial length as short as 5.5 cm). We describe the application to plasma propulsion using a new concept that employs no electrodes. A very small diameter (2.5 cm) helicon plasma with 10{sup 13} cm{sup -3} density is produced, and the preliminary results of electromagnetic plasma acceleration are briefly described.« less

Full wave simulations of helicon wave losses in the scrape-off-layer of the DIII-D tokamak

NASA Astrophysics Data System (ADS)

Lau, Cornwall; Jaeger, Fred; Berry, Lee; Bertelli, Nicola; Pinsker, Robert

2017-10-01

Helicon waves have been recently proposed as an off-axis current drive actuator for DIII-D. Previous modeling using the hot plasma, full wave code AORSA, has shown good agreement with the ray tracing code GENRAY for helicon wave propagation and absorption in the core plasma. AORSA, and a new, reduced finite-element-model show discrepancies between ray tracing and full wave occur in the scrape-off-layer (SOL), especially at high densities. The reduced model is much faster than AORSA, and reproduces most of the important features of the AORSA model. The reduced model also allows for larger parametric scans and for the easy use of arbitrary tokamak geometry. Results of the full wave codes, AORSA and COMSOL, will be shown for helicon wave losses in the SOL are shown for a large range of parameters, such as SOL density profiles, n||, radial and vertical locations of the antenna, and different tokamak vessel geometries. This work was supported by DE-AC05-00OR22725, DE-AC02-09CH11466, and DE-FC02-04ER54698.

Direct measurement of the transition from edge to core power coupling in a light-ion helicon source

DOE PAGES

Piotrowicz, Pawel A.; Caneses, Juan F.; Showers, Melissa A.; ...

2018-05-02

Here, we present time-resolved measurements of an edge-to-core power transition in a light-ion (deuterium) helicon discharge in the form of infra-red camera imaging of a thin stainless steel target plate on the Proto-Material Exposure eXperiment device. The time-resolved images measure the two-dimensional distribution of power deposition in the helicon discharge. The discharge displays a mode transition characterized by a significant increase in the on-axis electron density and core power coupling, suppression of edge power coupling, and the formation of a fast-wave radial eigenmode. Although the self-consistent mechanism that drives this transition is not yet understood, the edge-to-core power transition displaysmore » characteristics that are consistent with the discharge entering a slow-wave anti-resonant regime. RF magnetic field measurements made across the plasma column, together with the power deposition results, provide direct evidence to support the suppression of the slow-wave in favor of core plasma production by the fast-wave in a light-ion helicon source.« less

Direct measurement of the transition from edge to core power coupling in a light-ion helicon source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Piotrowicz, Pawel A.; Caneses, Juan F.; Showers, Melissa A.

Here, we present time-resolved measurements of an edge-to-core power transition in a light-ion (deuterium) helicon discharge in the form of infra-red camera imaging of a thin stainless steel target plate on the Proto-Material Exposure eXperiment device. The time-resolved images measure the two-dimensional distribution of power deposition in the helicon discharge. The discharge displays a mode transition characterized by a significant increase in the on-axis electron density and core power coupling, suppression of edge power coupling, and the formation of a fast-wave radial eigenmode. Although the self-consistent mechanism that drives this transition is not yet understood, the edge-to-core power transition displaysmore » characteristics that are consistent with the discharge entering a slow-wave anti-resonant regime. RF magnetic field measurements made across the plasma column, together with the power deposition results, provide direct evidence to support the suppression of the slow-wave in favor of core plasma production by the fast-wave in a light-ion helicon source.« less

Progress on Pre-Stage Magnetic Coil to Enhance Helicon Mode Excitation and Data Acquisition Software on the Helicon Plasma Experiment (HPX)

NASA Astrophysics Data System (ADS)

Sherman, Justin; Azzari, Phillip; Crilly, P. B.; Duke-Tinson, Omar; James, Royce W.; Karama, Jackson; Page, E. J.; Schlank, Carter; Zuniga, Jonathan

2014-10-01

CGAPL is conducting small investigations in plasma physics and magneto-hydrodynamics buoy positioning. For data management, we are developing capability to analyze/digitize data with a National Instruments Data Acquisition board, 2 MS/s sampling rate (long time scale), and an Express Octopus card, 125 MS/s sampling rate (short scale). Sampling at 12 bits precision, we use LabVIEW as a programing language; GUIs will control variables in 1 or more concurrent runs and monitor of diagnostics. HPX utilizes high density (1013 cm3 up), low pressure (.01 T) Ar gas (fill pressure: on 104 mTorr order). Helicon/W Mode plasmas become a diagnostics test-bed for other investigations and a tool for future spacecraft propulsion devices. Plasmas created by directing energy into gas-filled Pyrex tube; power supply and matching box, up to 250 W power in 20-100 MHz frequencies, provide energy to ignite. Uniform magnetic field needed to reach the W-Mode. We employ an electromagnet to B-field while an acceleration coil positions plasma in vacuum chamber, facilitating analysis. Initial field requirements and accuracy calibration have been completed. Progress on development and implementation of probes and DAQ/GUI system will be reported. Supported by U.S. DEPS Grant [HEL-JTO] PRWJFY13.

Modeling and Theory of RF Antenna Systems on Proto-MPEX

NASA Astrophysics Data System (ADS)

Piotrowicz, P. A.; Caneses, J. F.; Goulding, R. H.; Green, D.; Caughman, J. B. O.; Ruzic, D. N.; Proto-MPEX Team

2017-10-01

The RF wave coupling of the helicon and ICH antennas installed on the Prototype Material Plasma Exposure eXperiment (MPEX) has been explored theoretically and via a full wave model implemented in COMSOL Multiphysics. The high-density mode in Proto-MPEX has been shown to occur when exciting radial eigenmodes of the plasma column which coincides with entering a Trivelpiece Gould (TG) anti-resonant regime, therefore suppressing edge heating in favor of core power deposition. The fast wave launched by the helicon antenna has a large wavelength and travels at a steep group velocity angle with the background magnetic field; for this reason the fast wave launched by the helicon antenna efficiently couples power to the core plasma. However, the ICH heating scheme relies on a small wavelength slow wave to couple power to the core of the plasma column. Coupling slow wave power to the core of the plasma column is sensitive to the location of the Alfven resonance. The wave-vector and group velocity vector of the slow wave in this parameter regime undergoes a drastic change in behavior when approaching the Alfven resonance. Full wave simulation results and dispersion analysis will be presented with suggestions to guide experimental progress. This work was supported by the US. D.O.E. contract DE-AC05-00OR22725.

Helicons in uniform fields. II. Poynting vector and angular momenta

NASA Astrophysics Data System (ADS)

Stenzel, R. L.; Urrutia, J. M.

2018-03-01

The orbital and spin angular momenta of helicon modes have been determined quantitatively from laboratory experiments. The current density is obtained unambiguously from three dimensional magnetic field measurements. The only approximation made is to obtain the electric field from Hall Ohm's law which is usually the case for low frequency whistler modes. This allows the evaluation of the Poynting vector from which the angular momentum is obtained. Comparing two helicon modes (m = 0 and m = 1), one can separate the contribution of angular momentum of a rotating and non-rotating wave field. The orbital angular momentum is important to assess the wave-particle interaction by the transverse Doppler shift of rotating waves which has not been considered so far.

Correlation of wave propagation modes in helicon plasma with source tube lengths

NASA Astrophysics Data System (ADS)

Niu, Chen; Zhao, Gao; Wang, Yu; Liu, Zhongwei; Chen, Qiang

2017-01-01

Helicon wave plasma demonstrates lots of advantages in high coupling efficiency, high density, and low magnetic field. However, the helicon wave plasma still meets challenges in applications of material deposition, surface treatment, and electromagnetic thrusters owing to the changeable coupled efficiency and the remarkable non-uniformity. In this paper, we explore the wave propagation characterization by the B-dot probe in various lengths of source tubes. We find that in a long source tube the standing wave appears under the antenna zone, while the traveling wave is formed out of the antenna region. The apparent modulation of wave amplitude is formed in upstream rather than in downstream of the antenna. In a short source tube, however, there is only standing wave propagation.

Wall charging of a helicon antenna wrapped plasma filled dielectric tube

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barada, Kshitish K., E-mail: kbarada@physics.ucla.edu; Chattopadhyay, P. K., E-mail: pkchatto@ipr.res.in; Ghosh, J.

2015-01-15

Dielectric wall charging of a cylindrical glass wall surrounded by a helicon antenna of 18 cm length is measured in a linear helicon plasma device with a diverging magnetic field. The ions because of their lesser mobility do not respond to the high frequency electric field and the electrons charge the wall to a negative DC potential also known as the DC self-bias. The wall potential in this device is characterized for different neutral pressure, magnetic field, and radio frequency (RF) power. Axial variation of wall potential shows higher self-bias potentials near the antenna rings. Ion magnetization in the source chambermore » increases both wall charging and plasma potential of the source due to confinement.« less

Nonlinear helicons bearing multi-scale structures

NASA Astrophysics Data System (ADS)

Abdelhamid, Hamdi M.; Yoshida, Zensho

2017-02-01

The helicon waves exhibit varying characters depending on plasma parameters, geometry, and wave numbers. Here, we elucidate an intrinsic multi-scale property embodied by the combination of the dispersive effect and nonlinearity. The extended magnetohydrodynamics model (exMHD) is capable of describing a wide range of parameter space. By using the underlying Hamiltonian structure of exMHD, we construct an exact nonlinear solution, which turns out to be a combination of two distinct modes, the helicon and Trivelpiece-Gould (TG) waves. In the regime of relatively low frequency or high density, however, the combination is made of the TG mode and an ion cyclotron wave (slow wave). The energy partition between these modes is determined by the helicities carried by the wave fields.

Recent experimental results of KSTAR RF heating and current drive

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, S. J., E-mail: sjwang@nfri.re.kr; Kim, J.; Jeong, J. H.

2015-12-10

The overview of KSTAR activities on ICRH, LHCD and ECH/CD including the last experimental results and future plan aiming for long-pulse high-beta plasma will be presented. Recently we achieved reasonable coupling of ICRF power to H-mode plasma through several efforts to increase system reliability. Power balance will be discussed on this experiment. LHCD is still struggling in the low power regime. Review of antenna spectrum for the higher coupling in H-mode plasma will be tried. ECH/CD provides 41 sec, 0.8 MW of heating power to support high-performance long-pulse discharge. Also, 170 GHz ECH system is integrated with the Plasma Control Systemmore » (PCS) for the feedback controlling of NTM. Status and plan of ECH/CD will be discussed. Finally, helicon current drive is being prepared for the next stage of KSTAR operation. The hardware preparation and the calculation results of helicon current drive in KSTAR plasma will be discussed.« less

Measurements of neutral helium density in helicon plasmas.

PubMed

Houshmandyar, Saeid; Sears, Stephanie H; Thakur, Saikat Chakraborty; Carr, Jerry; Galante, Matthew E; Scime, Earl E

2010-10-01

Laser-induced-fluorescence (LIF) is used to measure the density of helium atoms in a helicon plasma source. For a pump wavelength of 587.725 nm (vacuum) and laser injection along the magnetic field, the LIF signal exhibits a signal decrease at the Doppler shifted central wavelength. The drop in signal results from the finite optical depth of the plasma and the magnitude of the decrease is proportional to the density of excited state neutral atoms. Using Langmuir probe measurements of plasma density and electron temperature and a collisional-radiative model, the absolute ground state neutral density is calculated from the optical depth measurements. Optimal plasma performance, i.e., the largest neutral depletion on the axis of the system, is observed for antenna frequencies of 13.0 and 13.5 MHz and magnetic field strengths of 550-600 G.

ArI/ArII laser induced fluorescence system for measurement of neutral and ion dynamics in a large scale helicon plasma

NASA Astrophysics Data System (ADS)

Kelly, R. F.; Meaney, K. D.; Gilmore, M.; Desjardins, T. R.; Zhang, Y.

2016-11-01

In order to investigate the role of both neutral and ion dynamics in large-scale helicon discharges, a laser induced fluorescence (LIF) system capable of measuring both ArI and ArII fluorescence using a single tunable laser is being developed. The system is based on a >250 mW solid state laser. For ArI measurements, the laser pumps the metastable (2P03/2)4s level to the (2P01/2)4p level using 696.7352 nm light, and fluorescence radiation from decay to the (2P01/2)4s level at 772.6333 nm is observed. For ArII, currently in development, the metastable (3P)3d 4F7/2 level will be pumped to the (3P)4p 4D07/2 level using 688.8511 nm, and decay fluorescence to the (3P)4s 4P5/2 level at 434.9285 nm measured. Here all wavelengths are in a vacuum.

ArI/ArII laser induced fluorescence system for measurement of neutral and ion dynamics in a large scale helicon plasma.

PubMed

Kelly, R F; Meaney, K D; Gilmore, M; Desjardins, T R; Zhang, Y

2016-11-01

In order to investigate the role of both neutral and ion dynamics in large-scale helicon discharges, a laser induced fluorescence (LIF) system capable of measuring both ArI and ArII fluorescence using a single tunable laser is being developed. The system is based on a >250 mW solid state laser. For ArI measurements, the laser pumps the metastable ( 2 P 0 3/2 )4s level to the ( 2 P 0 1/2 )4p level using 696.7352 nm light, and fluorescence radiation from decay to the ( 2 P 0 1/2 )4s level at 772.6333 nm is observed. For ArII, currently in development, the metastable ( 3 P)3d 4 F 7/2 level will be pumped to the ( 3 P)4p 4 D 0 7/2 level using 688.8511 nm, and decay fluorescence to the ( 3 P)4s 4 P 5/2 level at 434.9285 nm measured. Here all wavelengths are in a vacuum.

Sleep: Helicon Cells Charge the Circuit.

PubMed

Yurgel, Maria E; Keene, Alex C

2018-04-02

A new study in the fruit fly, Drosophila melanogaster, has identified a neural circuitry that connects regions that control sleep with those that encode sleep pressure. These novel cells, termed helicon cells for their unique morphology, are modulated by sleep control centers and integrate sensory information, providing a novel mechanism for gating of sleep. Copyright © 2018 Elsevier Ltd. All rights reserved.

AORSA full wave calculations of helicon waves in DIII-D and ITER

NASA Astrophysics Data System (ADS)

Lau, C.; Jaeger, E. F.; Bertelli, N.; Berry, L. A.; Green, D. L.; Murakami, M.; Park, J. M.; Pinsker, R. I.; Prater, R.

2018-06-01

Helicon waves have been recently proposed as an off-axis current drive actuator for DIII-D, FNSF, and DEMO tokamaks. Previous ray tracing modeling using GENRAY predicts strong single pass absorption and current drive in the mid-radius region on DIII-D in high beta tokamak discharges. The full wave code AORSA, which is valid to all order of Larmor radius and can resolve arbitrary ion cyclotron harmonics, has been used to validate the ray tracing technique. If the scrape-off-layer (SOL) is ignored in the modeling, AORSA agrees with GENRAY in both the amplitude and location of driven current for DIII-D and ITER cases. These models also show that helicon current drive can possibly be an efficient current drive actuator for ITER. Previous GENRAY analysis did not include the SOL. AORSA has also been used to extend the simulations to include the SOL and to estimate possible power losses of helicon waves in the SOL. AORSA calculations show that another mode can propagate in the SOL and lead to significant (~10%–20%) SOL losses at high SOL densities. Optimizing the SOL density profile can reduce these SOL losses to a few percent.

AORSA full wave calculations of helicon waves in DIII-D and ITER

DOE PAGES

Lau, Cornwall; Jaeger, E.F.; Bertelli, Nicola; ...

2018-04-11

Helicon waves have been recently proposed as an off-axis current drive actuator for DIII-D, FNSF, and DEMO tokamaks. Previous ray tracing modeling using GENRAY predicts strong single pass absorption and current drive in the mid-radius region on DIII-D in high beta tokamak discharges. The full wave code AORSA, which is valid to all order of Larmor radius and can resolve arbitrary ion cyclotron harmonics, has been used to validate the ray tracing technique. If the scrape-off-layer (SOL) is ignored in the modeling, AORSA agrees with GENRAY in both the amplitude and location of driven current for DIII-D and ITER cases.more » These models also show that helicon current drive can possibly be an efficient current drive actuator for ITER. Previous GENRAY analysis did not include the SOL. AORSA has also been used to extend the simulations to include the SOL and to estimate possible power losses of helicon waves in the SOL. AORSA calculations show that another mode can propagate in the SOL and lead to significant (~10-20%) SOL losses at high SOL densities. Optimizing the SOL density profile can reduce these SOL losses to a few percent.« less

Proof of principle experiments for helicon discharges in hydrogen

NASA Astrophysics Data System (ADS)

Briefi, Stefan; Fantz, Ursel

2013-09-01

In order to reduce the amount of power required for generating CW hydrogen discharges with high electron densities and a high degree of dissociation via RF coupling, the helicon concept is investigated. For this purpose a small laboratory experiment (length of the discharge vessel 40 cm, diameter 10 cm) has been built up. The RF generator has a maximum power of 600 W (frequency 13.56 MHz) and a Nagoya type III antenna is applied. As water cooling was avoided in constructing the experiment for simplicity, the induction coils can only generate a rather low magnetic field up to 14 mT. The performed investigations cover a variation of the RF power and the magnetic field in a pressure range between 0.3 and 10 Pa. Around a magnetic field of 3 mT the low field peak which is typical for helicon discharges could be observed. As the high density mode of helicon discharges has not yet been reached, a different RF generator (2 MHz, 2 KW) and water cooled induction coils will be applied in a next step in order to increase the available power and the magnetic field.

Helicon mysteries: fitting a plane wave into a cylinder

NASA Astrophysics Data System (ADS)

Boswell, Rod

2011-10-01

Since the first reports in the 1960s, the dispersion of helicon waves in a plasma cylinder has been difficult to describe theoretically for axial wavelengths that are greater than the plasma radius. About 10 years ago, Breizman and Arefiev showed how radial density gradients make the plasma column similar to a coaxial cable, allowing the helicon waves to propagate below the cut-off frequency. The resulting dispersion relation is similar to that of a plane wave propagating parallel to the magnetic field. A few years later, Degeling et. al. presented experimental evidence demonstrating such a plane wave dispersion for a broad range of axial wave numbers. The reason lies in the decoupling of the Hall and electron inertial terms in the dispersion, the former describing the electromagnetic propagation and the latter the electrostatic propagation. Combining the experimental and theoretical results has recently thrown further light on this phenomenon that is applicable to both space and laboratory situations. Radially Localized Helicon Modes in Nonuniform Plasma, Boris N. Breizman and Alexey V. Arefiev, Phys. Rev. Letts. 84, 3863 (2000). Transitions from electrostatic to electromagnetic whistler wave excitation, A. W. Degeling, G. G. Borg and R. W. Boswell, Phys. Plasmas, 11, 2144, (2004).

Improvement of Thrust Characteristics of Helicon Plasma Thruster using Local Gas Fueling Method

NASA Astrophysics Data System (ADS)

Kuwahara, Daisuke; Amma, Kosuke; Ishigami, Yuichi; Igarashi, Akihiko; Nishimoto, Shinichi; Shinohara, Shunjiro; Miyazawa, Junichi

2017-10-01

A helicon plasma thruster is proposed as a long-lifetime electric thruster which has non-direct contact electrodes. Here, a neutral particle, e.g., H2, Ar, and Xe works, as a fuel gas. In most cases, these gases are supplied into a discharge tube by the use of a simple nozzle. Therefore, the neutral particle fills a discharge tube homogenous. However, there are two problems in this configuration. First, there is a limitation of an electron density increase, due to a neutral particle depletion in the central region of the high-density helicon plasma. This limitation reduces the thrust performance directly. Second, the high-density plasma causes an erosion of an inner discharge tube wall. For the future MW class thruster, this problem will become serious because the particle and heat fluxes of the plasma will increase drastically. To solve above-mentioned problems, we have proposed local fueling methods for the high-density helicon plasma. In this presentation, we will show the methods and experimental results using a fueling tube, inserted in a plasma directly. This work is supported by JSPS KAKENHI Grant Number 16K17843 and NIFS Collaboration Research program (NIFSKBAF016).

Three-dimensional modeling of the neutral gas depletion effect in a helicon discharge plasma

NASA Astrophysics Data System (ADS)

Kollasch, Jeffrey; Schmitz, Oliver; Norval, Ryan; Reiter, Detlev; Sovinec, Carl

2016-10-01

Helicon discharges provide an attractive radio-frequency driven regime for plasma, but neutral-particle dynamics present a challenge to extending performance. A neutral gas depletion effect occurs when neutrals in the plasma core are not replenished at a sufficient rate to sustain a higher plasma density. The Monte Carlo neutral particle tracking code EIRENE was setup for the MARIA helicon experiment at UW Madison to study its neutral particle dynamics. Prescribed plasma temperature and density profiles similar to those in the MARIA device are used in EIRENE to investigate the main causes of the neutral gas depletion effect. The most dominant plasma-neutral interactions are included so far, namely electron impact ionization of neutrals, charge exchange interactions of neutrals with plasma ions, and recycling at the wall. Parameter scans show how the neutral depletion effect depends on parameters such as Knudsen number, plasma density and temperature, and gas-surface interaction accommodation coefficients. Results are compared to similar analytic studies in the low Knudsen number limit. Plans to incorporate a similar Monte Carlo neutral model into a larger helicon modeling framework are discussed. This work is funded by the NSF CAREER Award PHY-1455210.

AORSA full wave calculations of helicon waves in DIII-D and ITER

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lau, Cornwall; Jaeger, E.F.; Bertelli, Nicola

Helicon waves have been recently proposed as an off-axis current drive actuator for DIII-D, FNSF, and DEMO tokamaks. Previous ray tracing modeling using GENRAY predicts strong single pass absorption and current drive in the mid-radius region on DIII-D in high beta tokamak discharges. The full wave code AORSA, which is valid to all order of Larmor radius and can resolve arbitrary ion cyclotron harmonics, has been used to validate the ray tracing technique. If the scrape-off-layer (SOL) is ignored in the modeling, AORSA agrees with GENRAY in both the amplitude and location of driven current for DIII-D and ITER cases.more » These models also show that helicon current drive can possibly be an efficient current drive actuator for ITER. Previous GENRAY analysis did not include the SOL. AORSA has also been used to extend the simulations to include the SOL and to estimate possible power losses of helicon waves in the SOL. AORSA calculations show that another mode can propagate in the SOL and lead to significant (~10-20%) SOL losses at high SOL densities. Optimizing the SOL density profile can reduce these SOL losses to a few percent.« less

High Power Light Gas Helicon Plasma Source for VASIMR

NASA Technical Reports Server (NTRS)

Squire, Jared P.; Chang-Diaz, Franklin R.; Glover, Timothy W.; Jacobson, Verlin T.; Baity, F. Wally; Carter, Mark D.; Goulding, Richard H.

2004-01-01

In the Advanced Space Propulsion Laboratory (ASPL) helicon experiment (VX-10) we have measured a plasma flux to input gas rate ratio near 100% for both helium and deuterium at power levels up to 10 kW. Recent results at Oak Ridge National Laboratory (ORNL) show enhanced efficiency operation with a high power density, over 5 kW in a 5 cm diameter tube. Our helicon is presently 9 cm in diameter and operates up to 10 kW of input power. The data here uses a Boswell double-saddle antenna design with a magnetic cusp just upstream of the antenna. Similar to ORNL, for deuterium at near 10 kW, we find an enhanced performance of operation at magnetic fields above the lower hybrid matching condition.

Preparation and characterization of epitaxial Fe{sub 2-x}Ti{sub x}O{sub 3} films with various Ti concentrations (0.5

DOE Office of Scientific and Technical Information (OSTI.GOV)

Takada, Y.; Nakanishi, M.; Fujii, T.

2008-08-01

An ilmenite-hematite solid solution (Fe{sub 2-x}Ti{sub x}O{sub 3}) is one of the candidates for practical magnetic semiconductors with a high Curie temperature. We have prepared well-crystallized epitaxial Fe{sub 2-x}Ti{sub x}O{sub 3} films with a wide range of Ti concentrations--x=0.50, 0.60, 0.65, 0.76, 0.87, and 0.94--on {alpha}-Al{sub 2}O{sub 3}(001) substrates. The films are prepared by a reactive helicon plasma sputtering technique to evaporate Fe and TiO targets simultaneously under optimized oxygen pressure conditions. The structural characterizations of the films reveal that all films have a single phase of the ordered structure with R3 symmetry, where Ti-rich and Fe-rich layers are stackedmore » alternately along the c axis. All films have large ferrimagnetic moments at low temperature, and room temperature magnetization is clearly observed at x<0.7. The inverse temperature dependence of the resistivities of the films indicates their semiconducting behavior. The film resistivities decrease with decreasing Ti concentration.« less

Evidence for Trivelpiece-Gould modes in a helicon discharge.

PubMed

Blackwell, D D; Madziwa, T G; Arnush, D; Chen, F F

2002-04-08

The high ionization efficiency of helicon discharges has been attributed to Landau damping and mode coupling to Trivelpiece-Gould (TG) modes. Though theory predicts the importance of TG modes, they have rarely been seen. Here they were detected directly by measuring their radiofrequency current with a J-dot probe, thus supporting the contention that TG modes play a role in these enigmatic plasma sources.

Helicon plasma generator-assisted surface conversion ion source for the production of H- ion beams at the Los Alamos Neutron Science Centera)

NASA Astrophysics Data System (ADS)

Tarvainen, O.; Rouleau, G.; Keller, R.; Geros, E.; Stelzer, J.; Ferris, J.

2008-02-01

The converter-type negative ion source currently employed at the Los Alamos Neutron Science Center (LANSCE) is based on cesium enhanced surface production of H- ion beams in a filament-driven discharge. In this kind of an ion source the extracted H- beam current is limited by the achievable plasma density which depends primarily on the electron emission current from the filaments. The emission current can be increased by increasing the filament temperature but, unfortunately, this leads not only to shorter filament lifetime but also to an increase in metal evaporation from the filament, which deposits on the H- converter surface and degrades its performance. Therefore, we have started an ion source development project focused on replacing these thermionic cathodes (filaments) of the converter source by a helicon plasma generator capable of producing high-density hydrogen plasmas with low electron energy. In our studies which have so far shown that the plasma density of the surface conversion source can be increased significantly by exciting a helicon wave in the plasma, and we expect to improve the performance of the surface converter H- ion source in terms of beam brightness and time between services. The design of this new source and preliminary results are presented, along with a discussion of physical processes relevant for H- ion beam production with this novel design. Ultimately, we perceive this approach as an interim step towards our long-term goal, combining a helicon plasma generator with an SNS-type main discharge chamber, which will allow us to individually optimize the plasma properties of the plasma cathode (helicon) and H- production (main discharge) in order to further improve the brightness of extracted H- ion beams.

Helicon plasma generator-assisted surface conversion ion source for the production of H(-) ion beams at the Los Alamos Neutron Science Center.

PubMed

Tarvainen, O; Rouleau, G; Keller, R; Geros, E; Stelzer, J; Ferris, J

2008-02-01

The converter-type negative ion source currently employed at the Los Alamos Neutron Science Center (LANSCE) is based on cesium enhanced surface production of H(-) ion beams in a filament-driven discharge. In this kind of an ion source the extracted H(-) beam current is limited by the achievable plasma density which depends primarily on the electron emission current from the filaments. The emission current can be increased by increasing the filament temperature but, unfortunately, this leads not only to shorter filament lifetime but also to an increase in metal evaporation from the filament, which deposits on the H(-) converter surface and degrades its performance. Therefore, we have started an ion source development project focused on replacing these thermionic cathodes (filaments) of the converter source by a helicon plasma generator capable of producing high-density hydrogen plasmas with low electron energy. In our studies which have so far shown that the plasma density of the surface conversion source can be increased significantly by exciting a helicon wave in the plasma, and we expect to improve the performance of the surface converter H(-) ion source in terms of beam brightness and time between services. The design of this new source and preliminary results are presented, along with a discussion of physical processes relevant for H(-) ion beam production with this novel design. Ultimately, we perceive this approach as an interim step towards our long-term goal, combining a helicon plasma generator with an SNS-type main discharge chamber, which will allow us to individually optimize the plasma properties of the plasma cathode (helicon) and H(-) production (main discharge) in order to further improve the brightness of extracted H(-) ion beams.

Helicon modes in uniform plasmas. I. Low m modes

NASA Astrophysics Data System (ADS)

Urrutia, J. M.; Stenzel, R. L.

2015-09-01

Helicons are whistler modes with azimuthal wave numbers. They arise in bounded gaseous and solid state plasmas, but the present work shows that very similar modes also exist in unbounded uniform plasmas. The antenna properties determine the mode structure. A simple antenna is a magnetic loop with dipole moment aligned either along or across the ambient background magnetic field B0. For such configurations, the wave magnetic field has been measured in space and time in a large and uniform laboratory plasma. The observed wave topology for a dipole along B0 is similar to that of an m = 0 helicon mode. It consists of a sequence of alternating whistler vortices. For a dipole across B0, an m = 1 mode is excited which can be considered as a transverse vortex which rotates around B0. In m = 0 modes, the field lines are confined to each half-wavelength vortex while for m = 1 modes they pass through the entire wave train. A subset of m = 1 field lines forms two nested helices which rotate in space and time like corkscrews. Depending on the type of the antenna, both m = + 1 and m = -1 modes can be excited. Helicons in unbounded plasmas also propagate transverse to B0. The transverse and parallel wave numbers are about equal and form oblique phase fronts as in whistler Gendrin modes. By superimposing small amplitude fields of several loop antennas, various antenna combinations have been created. These include rotating field antennas, helical antennas, and directional antennas. The radiation efficiency is quantified by the radiation resistance. Since helicons exist in unbounded laboratory plasmas, they can also arise in space plasmas.

Pressure dependence of an ion beam accelerating structure in an expanding helicon plasma

NASA Astrophysics Data System (ADS)

Zhang, Xiao; Aguirre, Evan; Thompson, Derek S.; McKee, John; Henriquez, Miguel; Scime, Earl E.

2018-02-01

We present measurements of the parallel ion velocity distribution function and electric field in an expanding helicon source plasma plume as a function of downstream gas pressure and radial and axial positions. The ion beam that appears spontaneously in the plume persists for all downstream pressures investigated, with the largest parallel ion beam velocities obtained for the lowest downstream pressures. However, the change in ion beam velocity exceeds what would be expected simply for a change in the collisionality of the system. Electric field measurements confirm that it is the magnitude of the potential structure responsible for accelerating the ion beam that changes with downstream pressure. Interestingly, the ion density radial profile is hollow close to the end of the plasma source for all pressures, but it is hollow at downstream distances far from the source only at the highest downstream neutral pressures.

Measurements and modeling of radio frequency field structures in a helicon plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lee, C. A.; Chen, Guangye; Arefiev, A. V.

2011-01-01

Measurements of the radio frequency (rf) field structure, plasma density, and electron temperature are presented for a 1 kW argon helicon plasma source. The measured profiles change considerably when the equilibrium magnetic field is reversed. The measured rf fields are identified as fields of radially localized helicon waves, which propagate in the axial direction. The rf field structure is compared to the results of two-dimensional cold plasma full-wave simulations for the measured density profiles. Electron collision frequency is adjusted in the simulations to match the simulated and measured field profiles. The resulting frequency is anomalously high, which is attributed tomore » the excitation of an ion-acoustic instability. The calculated power deposition is insensitive to the collision frequency and accounts for most of the power supplied by the rf-generator.« less

Measurements of Ion and Neutral Fluctuation Changes with Pressure in a Large-Scale Helicon Plasma

NASA Astrophysics Data System (ADS)

Dwyer, R. H.; Fisher, D. M.; Kelly, R. F.; Hatch, M. W.; Gilmore, M.

2017-10-01

Neutral particle dynamics may play an important role both in laboratory plasmas and in the edge of magnetic fusion devices. However, studies of neutral dynamics in these plasmas have been limited to date. Here we report on a basic study of ion and neutral fluctuations as a function of background neutral gas pressure. These experiments have been conducted in helicon discharges in the HelCat (Helicon-Cathode) dual-source plasma device at the University of New Mexico. The goal is to measure changes in ion and neutral density fluctuations with pressure and to gain an improved understanding of plasma-neutral interactions. Langmuir probe, Ar-I LIF, and high-speed imaging measurements of the fluctuations will be presented. Supported by U.S. National Science Foundation Award 1500423 and The University of New Mexico School of Engineering.

Construction of protein-resistant pOEGMA films by helicon plasma-enhanced chemical vapor deposition.

PubMed

Lee, Bong Soo; Yoon, Ok Ja; Cho, Woo Kyung; Lee, Nae-Eung; Yoon, Kuk Ro; Choi, Insung S

2009-01-01

This paper describes the formation of protein-resistant, poly(ethylene glycol) methyl ether methacrylate (pOEGMA) thin films by helicon plasma-enhanced chemical vapor deposition (helicon-PECVD). pOEGMA was successfully grafted onto a silicon substrate, as a model substrate, without any additional surface initiators, by plasma polymerization of OEGMA. The resulting pOEGMA films were characterized by ellipsometry, FT-IR spectroscopy, X-ray photoelectron spectroscopy and contact angle goniometry. To investigate the protein-resistant property of the pOEGMA films, four different proteins, bovine serum albumin, fibrinogen, lysozyme and ribonuclease A, were tested as model proteins for ellipsometric measurements. The ellipsometric thickness change for all the model proteins was less than 3 A, indicating that the formed pOEGMA films are protein-resistant. (c) Koninklijke Brill NV, Leiden, 2009

Ion heating and flows in a high power helicon source

NASA Astrophysics Data System (ADS)

Thompson, Derek S.; Agnello, Riccardo; Furno, Ivo; Howling, Alan; Jacquier, Rémy; Plyushchev, Gennady; Scime, Earl E.

2017-06-01

We report experimental measurements of ion temperatures and flows in a high power, linear, magnetized, helicon plasma device, the Resonant Antenna Ion Device (RAID). Parallel and perpendicular ion temperatures on the order of 0.6 eV are observed for an rf power of 4 kW, suggesting that higher power helicon sources should attain ion temperatures in excess of 1 eV. The unique RAID antenna design produces broad, uniform plasma density and perpendicular ion temperature radial profiles. Measurements of the azimuthal flow indicate rigid body rotation of the plasma column of a few kHz. When configured with an expanding magnetic field, modest parallel ion flows are observed in the expansion region. The ion flows and temperatures are derived from laser induced fluorescence measurements of the Doppler resolved velocity distribution functions of argon ions.

RF absorption and ion heating in helicon sources.

PubMed

Kline, J L; Scime, E E; Boivin, R F; Keesee, A M; Sun, X; Mikhailenko, V S

2002-05-13

Experimental data are presented that are consistent with the hypothesis that anomalous rf absorption in helicon sources is due to electron scattering arising from parametrically driven ion-acoustic waves downstream from the antenna. Also presented are ion temperature measurements demonstrating anisotropic heating (T( perpendicular)>T(parallel)) at the edge of the discharge. The most likely explanation is ion-Landau damping of electrostatic slow waves at a local lower-hybrid-frequency resonance.

Microwave Assisted Helicon Plasmas

NASA Astrophysics Data System (ADS)

McKee, John; Caron, David; Jemiolo, Andrew; Scime, Earl

2017-10-01

The use of two (or more) rf sources at different frequencies is a common technique in the plasma processing industry to control ion energy characteristics separately from plasma generation. A similar approach is presented here with the focus on modifying the electron population in argon and helium plasmas. The plasma is generated by a helicon source at a frequency f0 = 13.56 MHz. Microwaves of frequency f1 = 2.45 GHz are then injected into the helicon source chamber perpendicular to the background magnetic field. The microwaves damp on the electrons via X-mode Electron Cyclotron Heating (ECH) at the upper hybrid resonance, providing additional energy input into the electrons. The effects of this secondary-source heating on electron density, temperature, and energy distribution function are examined and compared to helicon-only single source plasmas as well as numeric models suggesting that the heating is not evenly distributed. Optical Emission Spectroscopy (OES) is used to examine the impact of the energetic tail of the electron distribution on ion and neutral species via collisional excitation. Large enhancements of neutral spectral lines are observed in both Ar and He. While small enhancement of ion lines is seen in Ar, ion lines not normally present in He are observed during microwave injection. U.S. National Science Foundation Grant No. PHY-1360278.

The MARIA Helicon Plasma Experiment at UW Madison: Upgrade, Initial Scientific Goals Mission and First Results

NASA Astrophysics Data System (ADS)

Winters, Victoria; Green, Jonathan; Hershkowitz, Noah; Schmitz, Oliver; Severn, Greg

2015-11-01

The versatile helicon plasma device, MARIA (Magnetized AnisotRopic Ion-distribution Apparatus), was upgraded with stronger magnetic field B <= 1200G. The main focus is to understand the neutral particle dynamics and ionization mechanism with helicon waves to establish a high-density plasma (10 ∧ 20/m ∧ 3) at substantial electron (Te ~5-15eV) and ion (Ti ~1-3eV) temperature. To achieve this, installation of higher RF Power <= 15kW is planned as well as design of an ion cyclotron-heating antenna. To quantify the plasma characteristics, diagnostics including a Triple Langmuir Probe, Emissive Probe, and Laser Induced Fluorescence were established. We show first results from characterization of the device. The coupling of the helicon mode in the electron temperature and density parameter space in Argon was mapped out with regard to neutral pressure, B-field and RF power. In addition, validity of the Bohm Criterion and of the Chodura model starting in the weakly collisional regime is tested. A key goal in all efforts is to develop methods of quantitative spectroscopy based on cutting-edge models and active laser spectroscopy. This work was funded by Startup funds of the Department of Engineering Physics at UW Madison, the NSF CAREER award PHY-1455210 and NSF grant PHY-1206421.

Dedicated Co-deposition System for Metallic Paramagnetic Films

DOE PAGES

Jaeckel, F.; Kotsubo, V.; Hall, J. A.; ...

2012-01-27

Here, we describe a dedicated co-sputtering/ion-mill system developed to study metallic paramagnetic films for use in magnetic microcalorimetry. Small-diameter sputtering guns allow study of several precious-metal-based paramagnetic alloy systems within a reasonable budget. We demonstrated safe operation of a 1" sputtering gun at >5x the rated maximum power, achieving deposition rates up to ~900 Å/min/gun (Cu) in our co-sputtering geometry. Demonstrated co-sputtering deposition ratios up to 100:1 allow accurate tuning of magnetic dopant concentration and eliminate the difficulty of preparing homogeneous alloy targets of extreme dilution.

High Power Ion Cyclotron Heating in the VASIMR

NASA Astrophysics Data System (ADS)

Longmier, B. W.; Brukardt, M. S.; Bering, E. A.; Chang Diaz, F.; Squire, J.

2009-12-01

The Variable Specific Impulse Magnetoplasma Rocket (VASIMR®) is an electric propulsion system under development at Ad Astra Rocket Company that utilizes several processes of ion acceleration and heating that occur in the Birkeland currents of an auroral arc system. Among these processes are parallel electric field acceleration, lower hybrid resonance heating, and ion cyclotron resonance heating. The VASIMR® is capable of laboratory simulation of electromagnetic ion cyclotron wave heating during a single pass of ions through the resonance region. The plasma is generated by a helicon discharge of 35 kW then passes through a 176 kW RF booster stage that couples left hand polarized slow mode waves from the high field side of the resonance. VX-200 auroral simulation results from the past year are discussed. Ambipolar acceleration has been shown to produce 35eV argon ions in the helicon exhaust. The effects on the ion exhaust with an addition of 150-200 kW of ion cyclotron heating are presented. The changes to the VASIMR® experiment at Ad Astra Rocket Company's new facility in Webster, Texas will also be discussed, including the possibility of collaborative experiments.

Parametric scaling of neutral and ion excited state densities in an argon helicon source

NASA Astrophysics Data System (ADS)

McCarren, D.; Scime, E.

2016-04-01

We report measurements of the absolute density and temperature of ion and neutral excited states in an argon helicon source. The excited ion state density, which depends on ion density, electron density, and electron temperature, increases sharply with increasing magnetic field in the source. The neutral argon metastable density measurements are consistent with an increasing ionization fraction with increasing magnetic field strength. The ion temperature shows no evidence of increased heating with increasing magnetic field strength (which has only been observed in helicon sources operating at driving frequencies close to the lower hybrid frequency). The measurements were obtained through cavity ring down spectroscopy, a measurement technique that does not require the target excited state to be metastable or part of a fluorescence scheme; and is therefore applicable to any laser accessible atomic or ionic transition in a plasma.

On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lee, Jin-Won; Lee, Yun-Seong, E-mail: leeeeys@kaist.ac.kr; Chang, Hong-Young

2014-08-15

In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources duemore » to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.« less

Neutral depletion and the helicon density limit

DOE Office of Scientific and Technical Information (OSTI.GOV)

Magee, R. M.; Galante, M. E.; Carr, J. Jr.

2013-12-15

It is straightforward to create fully ionized plasmas with modest rf power in a helicon. It is difficult, however, to create plasmas with density >10{sup 20} m{sup −3}, because neutral depletion leads to a lack of fuel. In order to address this density limit, we present fast (1 MHz), time-resolved measurements of the neutral density at and downstream from the rf antenna in krypton helicon plasmas. At the start of the discharge, the neutral density underneath the antenna is reduced to 1% of its initial value in 15 μs. The ionization rate inferred from these data implies that the electronmore » temperature near the antenna is much higher than the electron temperature measured downstream. Neutral density measurements made downstream from the antenna show much slower depletion, requiring 14 ms to decrease by a factor of 1/e. Furthermore, the downstream depletion appears to be due to neutral pumping rather than ionization.« less

Electron Energy Distribution function in a weakly magnetized expanding helicon plasma discharge

NASA Astrophysics Data System (ADS)

Sirse, Nishant; Harvey, Cleo; Gaman, Cezar; Ellingboe, Bert

2016-09-01

Helicon wave heating is well known to produce high-density plasma source for application in plasma thrusters, plasma processing and many more. Our previous study (B Ellingboe et al. APS Gaseous Electronics Conference 2015, abstract #KW2.005) has shown observation of helicon wave in a weakly magnetized inductively coupled plasma source excited by m =0 antenna at 13.56 MHz. In this paper, we investigated the Electron Energy Distribution Function (EEDF) in the same setup by using an RF compensated Langmuir probe. The ac signal superimposition technique (second harmonic technique) is used to determine EEDF. The EEDF is measured for 5-100 mTorr gas pressure, 100 W - 1.5 kW rf power and at different locations in the source chamber, boundary and diffusion chamber. This paper will discuss the change in the shape of EEDF for various heating mode transitions.

A comparative study of radiofrequency antennas for Helicon plasma sources

NASA Astrophysics Data System (ADS)

Melazzi, D.; Lancellotti, V.

2015-04-01

Since Helicon plasma sources can efficiently couple power and generate high-density plasma, they have received interest also as spacecraft propulsive devices, among other applications. In order to maximize the power deposited into the plasma, it is necessary to assess the performance of the radiofrequency (RF) antenna that drives the discharge, as typical plasma parameters (e.g. the density) are varied. For this reason, we have conducted a comparative analysis of three Helicon sources which feature different RF antennas, namely, the single-loop, the Nagoya type-III and the fractional helix. These antennas are compared in terms of input impedance and induced current density; in particular, the real part of the impedance constitutes a measure of the antenna ability to couple power into the plasma. The results presented in this work have been obtained through a full-wave approach which (being hinged on the numerical solution of a system of integral equations) allows computing the antenna current and impedance self-consistently. Our findings indicate that certain combinations of plasma parameters can indeed maximize the real part of the input impedance and, thus, the deposited power, and that one of the three antennas analyzed performs best for a given plasma. Furthermore, unlike other strategies which rely on approximate antenna models, our approach enables us to reveal that the antenna current density is not spatially uniform, and that a correlation exists between the plasma parameters and the spatial distribution of the current density.

High Power Light Gas Helicon Plasma Source For VASMIR

NASA Technical Reports Server (NTRS)

Squire, J. P.; Chang-Diaz, F. R.; Glover, T. W.; Jacobson, V. T.; McCaskill, G. E.; Winter, D. S.; Baity, F. W.; Carter, M. D.; Goulding, R. H.

2004-01-01

The VASIMR space propulsion development effort relies on a high power (greater than 10kW) helicon source to produce a dense flowing plasma (H, D and He) target for ion cyclotron resonance (ICR) acceleration of the ions. Subsequent expansion in an expanding magnetic field (magnetic nozzle) converts ion lunetic energy to directed momentum. This plasma source must have critical features to enable an effective propulsion device. First, it must ionize most of the input neutral flux of gas, thus producing a plasma stream with a high degree of ionization for application of ICR power. This avoids propellant waste and potential power losses due to charge exchange. Next, the plasma stream must flow into a region of high magnetic field (approximately 0.5 T) for efficient ICR acceleration. Third, the ratio of input power to plasma flux must be low, providing an energy per ion-electron pair approaching 100 eV. Lastly, the source must be robust and capable of very long life-times (years). In our helicon experiment (VX-10) we have measured a ratio of input gas to plasma flux near 100%. The plasma flows from the helicon region (B approximately 0.1 T) into a region with a peak magnetic field of 0.8 T. The energy input per ion-electron pair has been measured at 300 plus or minus 100 eV. Recent results at Oak Ridge National Laboratory (ORNL) show an enhanced efficiency mode of operation with a high power density, over 5 kW in a 5 cm diameter tube. Our helicon is presently 9 cm in diameter and operates up to 3.5 kW of input power. An upgrade to a power level of 10 kW is underway. Much of our recent work has been with a Boswell double-saddle antenna design. We are also converting the antenna design to a helical type. With these modifications, we anticipate an improvement in the ionization efficiency. This paper presents the results from scaling the helicon in the VX-10 device from 3.5 to 10 kW. We also compare the operation with a double-saddle to a helical antenna design. Finally, we discuss modeling of these configurations using ORNL's EMIR code.

The effect of radio-frequency self bias on ion acceleration in expanding argon plasmas in helicon sources

NASA Astrophysics Data System (ADS)

Wiebold, Matthew D.

Time-averaged plasma potential differences up to ˜ 165 V over several hundred Debye lengths are observed in low pressure (pn < 1 mTorr) expanding argon plasmas in the Madison Helicon Experiment. The potential gradient leads to ion acceleration exceeding Ei ≈ 7 kTe in some cases. Up to 1 kW of 13.56 MHz RF power is supplied to a half-turn, double-helix antenna in the presence of a nozzle magnetic field up to 1 kG. An RPA measures the IEDF and an emissive probe measures the plasma potential. Single and double probes measure the electron density and temperature. Two distinct mode hops, the capacitive-inductive (E-H) and inductive-helicon (H-W) transitions, are identified by jumps in electron density as RF power is increased. In the capacitive mode, large fluctuations of the plasma potential (Vp--p ≳ 140 V, Vp--p/Vp ≈ 150%) exist at the RF frequency, leading to formation of a self-bias voltage. The mobile electrons can flow from the upstream region during an RF cycle whereas ions cannot, leading to an initial imbalance of flux, and the self-bias voltage builds as a result. The plasma potential in the expansion chamber is held near the floating potential for argon (Vp ≈ 5kTe/e). In the capacitive mode, the ion acceleration is not well described by an ambipolar relation. The accelerated population decay is consistent with that predicted by charge-exchange collisions. Grounding the upstream endplate increases the self-bias voltage compared to a floating endplate. In the inductive and helicon modes, the ion acceleration more closely follows an ambipolar relation, a result of decreased capacitive coupling due to the decreased RF skin depth. The scaling of the potential gradient with the argon flow rate, magnetic field and RF power are investigated, with the highest potential gradients observed for the lowest flow rates in the capacitive mode. The magnitude of the self-bias voltage agrees well with that predicted for RF sheaths. Use of the self-bias effect in a plasma thruster is explored, possibly for a low thrust, high specific impulse mode in a multi-mode helicon thruster. This work could also explain similar potential gradients in expanding helicon plasmas that are ascribed to double layer formation in the literature.

Sputtering of ices in the outer solar system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Johnson, R.E.

1996-01-01

Exploration of the outer solar system has led to studies in a new area of physics: electronically induced sputtering of low-temperature, condensed-gas solids (ices). Many of the icy bodies in the outer solar system were found to be bombarded by relatively intense fluxes of ions and electrons, causing both changes in their optical reflectance and ejection (sputtering) of molecules from their surfaces. The small cohesive energies of the condensed-gas solids afford relatively large sputtering rates from the electronic excitations produced in the solid by fast ions and electrons. Such sputtering produces an ambient gas about an icy body, often themore » source of the local plasma. This colloquium outlines the physics of the sputtering of ices and its relevance to several outer-solar-system phenomena: the sputter-produced plasma trapped in Saturn{close_quote}s magnetosphere; the O{sub 2} atmosphere on Europa; and optical absorption features such as SO{sub 2} in the surface of Europa and O{sub 2} and, possibly, O{sub 3} in the surface of Ganymede. {copyright} {ital 1996 The American Physical Society.}« less

Alternative RF coupling configurations for H{sup −} ion sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Briefi, S.; Fantz, U.; AG Experimentelle Plasmaphysik, Universität Augsburg, 86135 Augsburg

2015-04-08

RF heated sources for negative hydrogen ions both for fusion and accelerators require very high RF powers in order to achieve the required H{sup −} current what poses high demands on the RF generators and the RF circuit. Therefore it is highly desirable to improve the RF efficiency of the sources. This could be achieved by applying different RF coupling concepts than the currently used inductive coupling via a helical antenna, namely Helicon coupling or coupling via a planar ICP antenna enhanced with ferrites. In order to investigate the feasibility of these concepts, two small laboratory experiments have been setmore » up. The PlanICE experiment, where the enhanced inductive coupling is going to be investigated, is currently under assembly. At the CHARLIE experiment systematic measurements concerning Helicon coupling in hydrogen and deuterium are carried out. The investigations show that a prominent feature of Helicon discharges occurs: the so-called low-field peak. This is a local improvement of the coupling efficiency at a magnetic field strength of a few mT which results in an increased electron density and dissociation degree. The full Helicon mode has not been achieved yet due to the limited available RF power and magnetic field strength but it might be sufficient for the application of the coupling concept to ion sources to operate the discharge in the low-field-peak region.« less

Alternative RF coupling configurations for H- ion sources

NASA Astrophysics Data System (ADS)

Briefi, S.; Gutmann, P.; Fantz, U.

2015-04-01

RF heated sources for negative hydrogen ions both for fusion and accelerators require very high RF powers in order to achieve the required H- current what poses high demands on the RF generators and the RF circuit. Therefore it is highly desirable to improve the RF efficiency of the sources. This could be achieved by applying different RF coupling concepts than the currently used inductive coupling via a helical antenna, namely Helicon coupling or coupling via a planar ICP antenna enhanced with ferrites. In order to investigate the feasibility of these concepts, two small laboratory experiments have been set up. The PlanICE experiment, where the enhanced inductive coupling is going to be investigated, is currently under assembly. At the CHARLIE experiment systematic measurements concerning Helicon coupling in hydrogen and deuterium are carried out. The investigations show that a prominent feature of Helicon discharges occurs: the so-called low-field peak. This is a local improvement of the coupling efficiency at a magnetic field strength of a few mT which results in an increased electron density and dissociation degree. The full Helicon mode has not been achieved yet due to the limited available RF power and magnetic field strength but it might be sufficient for the application of the coupling concept to ion sources to operate the discharge in the low-field-peak region.

A linear helicon plasma device with controllable magnetic field gradient.

PubMed

Barada, Kshitish K; Chattopadhyay, P K; Ghosh, J; Kumar, Sunil; Saxena, Y C

2012-06-01

Current free double layers (CFDLs) are localized potential structures having spatial dimensions - Debye lengths and potential drops of more than local electron temperature across them. CFDLs do not need a current for them to be sustained and hence they differ from the current driven double layers. Helicon antenna produced plasmas in an expanded chamber along with an expanding magnetic field have shown the existence of CFDL near the expansion region. A helicon plasma device has been designed, fabricated, and installed in the Institute for Plasma Research, India to study the role of maximum magnetic field gradient as well as its location with respect to the geometrical expansion region of the chamber in CFDL formation. The special feature of this machine consisting of two chambers of different radii is its capability of producing different magnetic field gradients near the physical boundary between the two chambers either by changing current in one particular coil in the direction opposite to that in other coils and/or by varying the position of this particular coil. Although, the machine is primarily designed for CFDL experiments, it is also capable of carrying out many basic plasma physics experiments such as wave propagation, wave coupling, and plasma instabilities in a varying magnetic field topology. In this paper, we will present the details of the machine construction, its specialties, and some preliminary results about the production and characterization of helicon plasma in this machine.

Comparative studies on damages to organic layer during the deposition of ITO films by various sputtering methods

NASA Astrophysics Data System (ADS)

Lei, Hao; Wang, Meihan; Hoshi, Yoichi; Uchida, Takayuki; Kobayashi, Shinichi; Sawada, Yutaka

2013-11-01

Aluminum (III) bis(2-methyl-8-quninolinato)-4-phenylphenolate (BAlq) was respectively bombarded and irradiated by Ar ions, oxygen ions, electron beam and ultraviolet light to confirm damages during the sputter-deposition of transparent conductive oxide (TCO) on organic layer. The degree of damage was evaluated by the photoluminescence (PL) spectra of BAlq. The results confirmed the oxygen ions led to a larger damage and were thought to play the double roles of bombardment to organic layer and reaction with organic layer as well. The comparative studies on PL spectra of BAlq after the deposition of TCO films by various sputtering systems, such as conventional magnetron sputtering (MS), low voltage sputtering (LVS) and kinetic-energy-control-deposition (KECD) system, facing target sputtering (FTS) were performed. Relative to MS, LVS and KECD system, FTS can completely suppress the bombardment of the secondary electrons and oxygen negative ions, and keep a higher deposition rate simultaneously, thus it is a good solution to attain a low-damage sputter-deposition.

Ambipolar ion acceleration in an expanding magnetic nozzle

NASA Astrophysics Data System (ADS)

Longmier, Benjamin W.; Bering, Edgar A., III; Carter, Mark D.; Cassady, Leonard D.; Chancery, William J.; Díaz, Franklin R. Chang; Glover, Tim W.; Hershkowitz, Noah; Ilin, Andrew V.; McCaskill, Greg E.; Olsen, Chris S.; Squire, Jared P.

2011-02-01

The helicon plasma stage in the Variable Specific Impulse Magnetoplasma Rocket (VASIMR®) VX-200i device was used to characterize an axial plasma potential profile within an expanding magnetic nozzle region of the laboratory based device. The ion acceleration mechanism is identified as an ambipolar electric field produced by an electron pressure gradient, resulting in a local axial ion speed of Mach 4 downstream of the magnetic nozzle. A 20 eV argon ion kinetic energy was measured in the helicon source, which had a peak magnetic field strength of 0.17 T. The helicon plasma source was operated with 25 mg s-1 argon propellant and 30 kW of RF power. The maximum measured values of plasma density and electron temperature within the exhaust plume were 1 × 1020 m-3 and 9 eV, respectively. The measured plasma density is nearly an order of magnitude larger than previously reported steady-state helicon plasma sources. The exhaust plume also exhibits a 95% to 100% ionization fraction. The size scale and spatial location of the plasma potential structure in the expanding magnetic nozzle region appear to follow the size scale and spatial location of the expanding magnetic field. The thickness of the potential structure was found to be 104 to 105 λDe depending on the local electron temperature in the magnetic nozzle, many orders of magnitude larger than typical laboratory double layer structures. The background plasma density and neutral argon pressure were 1015 m-3 and 2 × 10-5 Torr, respectively, in a 150 m3 vacuum chamber during operation of the helicon plasma source. The agreement between the measured plasma potential and plasma potential that was calculated from an ambipolar ion acceleration analysis over the bulk of the axial distance where the potential drop was located is a strong confirmation of the ambipolar acceleration process.

Helicon wave coupling in KSTAR plasmas for off-axis current drive in high electron pressure plasmas

NASA Astrophysics Data System (ADS)

Wang, S. J.; Wi, H. H.; Kim, H. J.; Kim, J.; Jeong, J. H.; Kwak, J. G.

2017-04-01

A helicon wave current drive is proposed as an efficient off-axis current drive in the high electron β plasmas that are expected in fusion reactors. A high frequency helicon wave coupling was analyzed using the surface impedance at a plasma boundary. A slow wave coupling, which may compete with the helicon wave coupling at a frequency of 500 MHz, is estimated to be lower than the fast wave coupling by an order of magnitude in the KSTAR edge plasma density and in practical Faraday shield misalignment with the magnetic pitch. A traveling wave antenna, which is a two port combline antenna, was analyzed using a simplified lumped element model. The results show that the traveling wave antenna provides load resiliency because of its insensitivity to loading resistance, provided that the loading resistance at a radiating element is limited within a practical range. The combline antenna is attractive because it does not require a matching system and exhibits a high selectivity of parallel refractive index. Based on the analysis, a seven element combline antenna was fabricated and installed at an off-mid-plane offset of 30 cm from the mid-plane in KSTAR. The low power RF characteristics measured during several plasma discharges showed no evidence of slow wave coupling. This is consistent with the expectation made through the surface impedance analysis which predicted low slow wave coupling. The wave coupling to the plasma is easily controlled by a radial outer-gap control and gas puffing. No plasma confinement degradation was observed during the radial outer-gap control of up to 3 cm in H-mode discharges. In a ELMy plasmas, only a small reflection peak was observed during a very short portion of the ELM bursting period. If the number of radiating elements is increased for high power operation, then complete load resiliency can be expected. A very large coupling can be problematic for maintaining a parallel refractive index, although this issue can be mitigated by increasing the number of elements.

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

NASA Technical Reports Server (NTRS)

Routh, D. E.; Sharma, G. C. (Inventor)

1984-01-01

An apparatus is disclosed which includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a dc magnetron sputtering system. A gas inlet introduces various gases to the vacuum chamber and creates various gas plasma during the sputtering steps. The rotating turntables insure that the respective wafers are present under the sputtering guns for an average amount of time such that consistency in sputtering and deposition is achieved. By continuous and sequential processing of the wafers in a common vacuum chamber without removal, the adverse affects of exposure to atmospheric conditions are eliminated providing higher quality circuit contacts and functional device.

Heliconical smectic phases formed by achiral molecules

DOE PAGES

Abberley, Jordan P.; Killah, Ross; Walker, Rebecca; ...

2018-01-15

Chiral symmetry breaking in soft matter is a hot topic of current research. Recently, such a phenomenon was found in a fluidic phase showing orientational order of molecules - the nematic phase; although built of achiral molecules, the phase can exhibit structural chirality - average molecular direction follows a short-pitch helix. Here in this paper, we report a series of achiral asymmetric dimers with an odd number of atoms in the spacer, which form twisted structures in nematic as well as in lamellar phases. The tight pitch heliconical nematic (N TB) phase and heliconical tilted smectic C (SmC TB) phasemore » are formed. The formation of a variety of helical structures is accompanied by a gradual freezing of molecular rotation. In the lowest temperature smectic phase, HexI, the twist is expressed through the formation of hierarchical structure: nanoscale helices and mesoscopic helical filaments. The short-pitch helical structure in the smectic phases is confirmed by resonant X-ray measurements.« less

Heliconical smectic phases formed by achiral molecules

DOE Office of Scientific and Technical Information (OSTI.GOV)

Abberley, Jordan P.; Killah, Ross; Walker, Rebecca

Chiral symmetry breaking in soft matter is a hot topic of current research. Recently, such a phenomenon was found in a fluidic phase showing orientational order of molecules - the nematic phase; although built of achiral molecules, the phase can exhibit structural chirality - average molecular direction follows a short-pitch helix. Here in this paper, we report a series of achiral asymmetric dimers with an odd number of atoms in the spacer, which form twisted structures in nematic as well as in lamellar phases. The tight pitch heliconical nematic (N TB) phase and heliconical tilted smectic C (SmC TB) phasemore » are formed. The formation of a variety of helical structures is accompanied by a gradual freezing of molecular rotation. In the lowest temperature smectic phase, HexI, the twist is expressed through the formation of hierarchical structure: nanoscale helices and mesoscopic helical filaments. The short-pitch helical structure in the smectic phases is confirmed by resonant X-ray measurements.« less

Plasma control by modification of helicon wave propagation in low magnetic fields

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lafleur, T.; Charles, C.; Boswell, R. W.

2010-07-15

By making use of nonuniform magnetic fields, it is shown experimentally that control of helicon wave propagation can be achieved in a low pressure (0.08 Pa) expanding plasma. The m=1 helicon waves are formed during a direct capacitive to wave mode transition that occurs in a low diverging magnetic field (B{sub 0}<3 mT). In this initial configuration, waves are prevented from reaching the downstream region, but slight modifications to the magnetic field allows the axial distance over which waves can propagate to be controlled. By changing the effective propagation distance in this way, significant modification of the density and plasmamore » potential profiles can be achieved, showing that the rf power deposition can be spatially controlled as well. Critical to the modification of the wave propagation behavior is the magnetic field strength (and geometry) near the exit of the plasma source region, which gives electron cyclotron frequencies close to the wave frequency of 13.56 MHz.« less

Helicon thruster plasma modeling: Two-dimensional fluid-dynamics and propulsive performances

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ahedo, Eduardo; Navarro-Cavalle, Jaume

2013-04-15

An axisymmetric macroscopic model of the magnetized plasma flow inside the helicon thruster chamber is derived, assuming that the power absorbed from the helicon antenna emission is known. Ionization, confinement, subsonic flows, and production efficiency are discussed in terms of design and operation parameters. Analytical solutions and simple scaling laws for ideal plasma conditions are obtained. The chamber model is then matched with a model of the external magnetic nozzle in order to characterize the whole plasma flow and assess thruster performances. Thermal, electric, and magnetic contributions to thrust are evaluated. The energy balance provides the power conversion between ionsmore » and electrons in chamber and nozzle, and the power distribution among beam power, ionization losses, and wall losses. Thruster efficiency is assessed, and the main causes of inefficiency are identified. The thermodynamic behavior of the collisionless electron population in the nozzle is acknowledged to be poorly known and crucial for a complete plasma expansion and good thrust efficiency.« less

Negative hydrogen ion production in a helicon plasma source

NASA Astrophysics Data System (ADS)

Santoso, J.; Manoharan, R.; O'Byrne, S.; Corr, C. S.

2015-09-01

In order to develop very high energy (>1 MeV) neutral beam injection systems for applications, such as plasma heating in fusion devices, it is necessary first to develop high throughput negative ion sources. For the ITER reference source, this will be realised using caesiated inductively coupled plasma devices, containing either hydrogen or deuterium discharges, operated with high rf input powers (up to 90 kW per driver). It has been suggested that due to their high power coupling efficiency, helicon devices may be able to reduce power requirements and potentially obviate the need for caesiation due to the high plasma densities achievable. Here, we present measurements of negative ion densities in a hydrogen discharge produced by a helicon device, with externally applied DC magnetic fields ranging from 0 to 8.5 mT at 5 and 10 mTorr fill pressures. These measurements were taken in the magnetised plasma interaction experiment at the Australian National University and were performed using the probe-based laser photodetachment technique, modified for the use in the afterglow of the plasma discharge. A peak in the electron density is observed at ˜3 mT and is correlated with changes in the rf power transfer efficiency. With increasing magnetic field, an increase in the negative ion fraction from 0.04 to 0.10 and negative ion densities from 8 × 1014 m-3 to 7 × 1015 m-3 is observed. It is also shown that the negative ion densities can be increased by a factor of 8 with the application of an external DC magnetic field.

Experimental observation of left polarized wave absorption near electron cyclotron resonance frequency in helicon antenna produced plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barada, Kshitish K.; Chattopadhyay, P. K.; Ghosh, J.

2013-01-15

Asymmetry in density peaks on either side of an m = +1 half helical antenna is observed both in terms of peak position and its magnitude with respect to magnetic field variation in a linear helicon plasma device [Barada et al., Rev. Sci. Instrum. 83, 063501 (2012)]. The plasma is produced by powering the m = +1 half helical antenna with a 2.5 kW, 13.56 MHz radio frequency source. During low magnetic field (B < 100 G) operation, plasma density peaks are observed at critical magnetic fields on either side of the antenna. However, the density peaks occurred at differentmore » critical magnetic fields on both sides of antenna. Depending upon the direction of the magnetic field, in the m = +1 propagation side, the main density peak has been observed around 30 G of magnetic field. On this side, the density peak around 5 G corresponding to electron cyclotron resonance (ECR) is not very pronounced, whereas in the m = -1 propagation side, very pronounced ECR peak has been observed around 5 G. Another prominent density peak around 12 G has also been observed in m = -1 side. However, no peak has been observed around 30 G on this m = -1 side. This asymmetry in the results on both sides is explained on the basis of polarization reversal of left hand polarized waves to right hand polarized waves and vice versa in a bounded plasma system. The density peaking phenomena are likely to be caused by obliquely propagating helicon waves at the resonance cone boundary.« less

A linear helicon plasma device with controllable magnetic field gradient

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barada, Kshitish K.; Chattopadhyay, P. K.; Ghosh, J.

2012-06-15

Current free double layers (CFDLs) are localized potential structures having spatial dimensions - Debye lengths and potential drops of more than local electron temperature across them. CFDLs do not need a current for them to be sustained and hence they differ from the current driven double layers. Helicon antenna produced plasmas in an expanded chamber along with an expanding magnetic field have shown the existence of CFDL near the expansion region. A helicon plasma device has been designed, fabricated, and installed in the Institute for Plasma Research, India to study the role of maximum magnetic field gradient as well asmore » its location with respect to the geometrical expansion region of the chamber in CFDL formation. The special feature of this machine consisting of two chambers of different radii is its capability of producing different magnetic field gradients near the physical boundary between the two chambers either by changing current in one particular coil in the direction opposite to that in other coils and/or by varying the position of this particular coil. Although, the machine is primarily designed for CFDL experiments, it is also capable of carrying out many basic plasma physics experiments such as wave propagation, wave coupling, and plasma instabilities in a varying magnetic field topology. In this paper, we will present the details of the machine construction, its specialties, and some preliminary results about the production and characterization of helicon plasma in this machine.« less

Design of a high particle flux hydrogen helicon plasma source for used in plasma materials interaction studies

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goulding, R. H.; Chen, G.; Meitner, S.

2009-11-26

Existing linear plasma materials interaction (PMI) facilities all use plasma sources with internal electrodes. An rf-based helicon source is of interest because high plasma densities can be generated with no internal electrodes, allowing true steady state operation with minimal impurity generation. Work has begun at Oak Ridge National Laboratory (ORNL) to develop a large (15 cm) diameter helicon source producing hydrogen plasmas with parameters suitable for use in a linear PMI device: n{sub e}{>=}10{sup 19} m{sup -3}, T{sub e} = 4-10 eV, particle flux {gamma}{sub p}>10{sup 23}m{sup -3} s{sup -1}, and magnetic field strength |B| up to 1 T inmore » the source region. The device, whose design is based on a previous hydrogen helicon source operated at ORNL[1], will operate at rf frequencies in the range 10-26 MHz, and power levels up to {approx}100 kW. Limitations in cooling will prevent operation for pulses longer than several seconds, but a major goal will be the measurement of power deposition on device structures so that a later steady state version can be designed. The device design, the diagnostics to be used, and results of rf modeling of the device will be discussed. These include calculations of plasma loading, resulting currents and voltages in antenna structures and the matching network, power deposition profiles, and the effect of high |B| operation on power absorption.« less

Erratum: Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

NASA Astrophysics Data System (ADS)

Aleksandrov, A. F.; Petrov, A. K.; Vavilin, K. V.; Kralkina, E. A.; Neklyudova, P. A.; Nikonov, A. M.; Pavlov, V. B.; Ayrapetov, A. A.; Odinokov, V. V.; Sologub, V. A.; Pavlov, G. Ya.

2017-12-01

The following must be added at the end of Acknowledgments: The study by JSC Research Institute of Precision Machine Manufacturing was supported by the Ministry of Education and Science of the Russian Federation, Agreement no. 14.576.21.0021 dated June 30, 2014. The unique identifier of this applied research project is RFMEF157614X0021.

Laser induced fluorescence measurements of ion velocity and temperature of drift turbulence driven sheared plasma flow in a linear helicon plasma device

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chakraborty Thakur, S.; Fedorczak, N.; Manz, P.

2012-08-15

Using laser induced fluorescence (LIF), radial profiles of azimuthal ion fluid velocity and ion temperature are measured in the controlled shear de-correlation experiment (CSDX) linear helicon plasma device. Ion velocities and temperatures are derived from the measured Doppler broadened velocity distribution functions of argon ions. The LIF system employs a portable, high power (>300 mW), narrowband ({approx}1 MHz) tunable diode laser-based system operating at 668.614 nm. Previous studies in CSDX have shown the existence of a radially sheared azimuthal flow as measured with time delay estimation methods and Mach probes. Here, we report the first LIF measurements of sheared plasmamore » fluid flow in CSDX. Above a critical magnetic field, the ion fluid flow profile evolves from radially uniform to peaked on axis with a distinct reversed flow region at the boundary, indicating the development of a sheared azimuthal flow. Simultaneously, the ion temperature also evolves from a radially uniform profile to a profile with a gradient. Measurements in turbulent and coherent drift wave mode dominated plasmas are compared.« less

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Zhaoying; Liu, Bingwen; Zhao, Evan

For the first time, the use of an argon cluster ion sputtering source has been demonstrated to perform superiorly relative to traditional oxygen and cesium ion sputtering sources for ToF-SIMS depth profiling of insulating materials. The superior performance has been attributed to effective alleviation of surface charging. A simulated nuclear waste glass, SON68, and layered hole-perovskite oxide thin films were selected as model systems due to their fundamental and practical significance. Our study shows that if the size of analysis areas is same, the highest sputter rate of argon cluster sputtering can be 2-3 times faster than the highest sputtermore » rates of oxygen or cesium sputtering. More importantly, high quality data and high sputter rates can be achieved simultaneously for argon cluster sputtering while this is not the case for cesium and oxygen sputtering. Therefore, for deep depth profiling of insulating samples, the measurement efficiency of argon cluster sputtering can be about 6-15 times better than traditional cesium and oxygen sputtering. Moreover, for a SrTiO3/SrCrO3 bi-layer thin film on a SrTiO3 substrate, the true 18O/16O isotopic distribution at the interface is better revealed when using the argon cluster sputtering source. Therefore, the implementation of an argon cluster sputtering source can significantly improve the measurement efficiency of insulating materials, and thus can expand the application of ToF-SIMS to the study of glass corrosion, perovskite oxide thin films, and many other potential systems.« less

Development of very small-diameter, inductively coupled magnetized plasma device

NASA Astrophysics Data System (ADS)

Kuwahara, D.; Mishio, A.; Nakagawa, T.; Shinohara, S.

2013-10-01

In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (˜1019 m-3) plasmas using quartz tubes with very small diameters of 10 and 20 mm, with a radio frequency power ˜1200 and 700 W, respectively, in the presence of the magnetic field less than 1 kG.

Boltzmann expansion in a radiofrequency conical helicon thruster operating in xenon and argon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Charles, C.; Boswell, R.; Takahashi, K.

2013-06-03

A low pressure ({approx}0.5 mTorr in xenon and {approx}1 mTorr in argon) Boltzmann expansion is experimentally observed on axis within a magnetized (60 to 180 G) radiofrequency (13.56 MHz) conical helicon thruster for input powers up to 900 W using plasma parameters measured with a Langmuir probe. The axial forces, respectively, resulting from the electron and magnetic field pressures are directly measured using a thrust balance for constant maximum plasma pressure and show a higher fuel efficiency for argon compared to xenon.

Development of very small-diameter, inductively coupled magnetized plasma device.

PubMed

Kuwahara, D; Mishio, A; Nakagawa, T; Shinohara, S

2013-10-01

In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (~10(19) m(-3)) plasmas using quartz tubes with very small diameters of 10 and 20 mm, with a radio frequency power ~1200 and 700 W, respectively, in the presence of the magnetic field less than 1 kG.

Numerical simulation of the coaxial magneto-plasma accelerator and non-axisymmetric radio frequency discharge

NASA Astrophysics Data System (ADS)

Kuzenov, V. V.; Ryzhkov, S. V.; Frolko, P. A.

2017-05-01

The paper presents the results of mathematical modeling of physical processes in electronic devices such as helicon discharge and coaxial pulsed plasma thruster. A mathematical model of coaxial magneto-plasma accelerator (with a preionization helicon discharge), which allows estimating the transformation of one form of energy to another, as well as to evaluate the level of the contribution of different types of energy, the increase in mass of the accelerated plasmoid in the process of changing the speed. Main plasma parameters with experimental data were compared.

Transport modeling of convection dominated helicon discharges in Proto-MPEX with the B2.5-Eirene code

NASA Astrophysics Data System (ADS)

Owen, L. W.; Rapp, J.; Canik, J.; Lore, J. D.

2017-11-01

Data-constrained interpretative analyses of plasma transport in convection dominated helicon discharges in the Proto-MPEX linear device, and predictive calculations with additional Electron Cyclotron Heating/Electron Bernstein Wave (ECH/EBW) heating, are reported. The B2.5-Eirene code, in which the multi-fluid plasma code B2.5 is coupled to the kinetic Monte Carlo neutrals code Eirene, is used to fit double Langmuir probe measurements and fast camera data in front of a stainless-steel target. The absorbed helicon and ECH power (11 kW) and spatially constant anomalous transport coefficients that are deduced from fitting of the probe and optical data are additionally used for predictive simulations of complete axial distributions of the densities, temperatures, plasma flow velocities, particle and energy fluxes, and possible effects of alternate fueling and pumping scenarios. The somewhat hollow electron density and temperature radial profiles from the probe data suggest that Trivelpiece-Gould wave absorption is the dominant helicon electron heating source in the discharges analyzed here. There is no external ion heating, but the corresponding calculated ion temperature radial profile is not hollow. Rather it reflects ion heating by the electron-ion equilibration terms in the energy balance equations and ion radial transport resulting from the hollow density profile. With the absorbed power and the transport model deduced from fitting the sheath limited discharge data, calculated conduction limited higher recycling conditions were produced by reducing the pumping and increasing the gas fueling rate, resulting in an approximate doubling of the target ion flux and reduction of the target heat flux.

Production of high-density highly-ionized helicon plasmas in the ProtoMPEX

NASA Astrophysics Data System (ADS)

Caneses, J. F.; Kafle, N.; Showers, M.; Goulding, R. H.; Biewer, T. M.; Caughman, J. B. O.; Bigelow, T.; Rapp, J.

2017-10-01

High-density (2-6e19 m-3) Deuterium helicon plasmas in the ProtoMPEX have been produced that successfully use differential pumping to produce neutral gas pressures suitable for testing the RF electron and ion heating concepts. To minimize collisional losses when heating electrons and ions, plasmas with very low neutral gas content (<< 0.1 Pa) in the heating sections are required. This requirement is typically not compatible with the neutral gas pressures (1-2 Pa) commonly used in high-density light-ion helicon sources. By using skimmers, a suitable gas injection scheme and long duration discharges (>0.3 s), high-density plasmas with very low neutral gas pressures (<< 0.1 Pa) in the RF heating sections have been produced. Measurements indicate the presence of a highly-ionized plasma column and that discharges lasting at least 0.3 s are required to significantly reduce the neutral gas pressure in the RF heating sections to levels suitable for investigating electron/ion RF heating concepts in this linear configuration. This work was supported by the US. D.O.E. contract DE-AC05-00OR22725.

Helicon wave field measurements in Proto-MPEX

NASA Astrophysics Data System (ADS)

Caneses, Juan Francisco; Piotrowicz, Pawel; Goulding, Richard; Caughman, John; Showers, Missy; Kafle, Nischal; Rapp, Juergen; Campbell, Ian; Proto-MPEX Team

2016-10-01

A high density Deuterium discharge (ne 5e19 m-3, Te 4 eV) has been recently observed in ProtoMPEX (Prototype Material Plasma Exposure eXperiment). The discharge (100 kW, 13.56 MHz, D2, 700 G at the source, 1e4 G at the Target) begins with a low density plasma with hollow Te profile and transitions in about 100 ms to a high density mode with flat Te profile. It is believed that the transition to the high density mode is produced by a ``helicon resonance'' as evidenced by the centrally-peaked power deposition profile observed with IR imaging on a 2 mm thick metallic target plate. In this work, we present b-dot probe measurements of the radial helicon wavefields 30 cm downstream of the antenna during both the low and high density modes. In addition, we compare the experimental results with full wave simulations. This manuscript has been authored by UT-Battelle, LLC, under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy.

Recurrent Circuitry for Balancing Sleep Need and Sleep.

PubMed

Donlea, Jeffrey M; Pimentel, Diogo; Talbot, Clifford B; Kempf, Anissa; Omoto, Jaison J; Hartenstein, Volker; Miesenböck, Gero

2018-01-17

Sleep-promoting neurons in the dorsal fan-shaped body (dFB) of Drosophila are integral to sleep homeostasis, but how these cells impose sleep on the organism is unknown. We report that dFB neurons communicate via inhibitory transmitters, including allatostatin-A (AstA), with interneurons connecting the superior arch with the ellipsoid body of the central complex. These "helicon cells" express the galanin receptor homolog AstA-R1, respond to visual input, gate locomotion, and are inhibited by AstA, suggesting that dFB neurons promote rest by suppressing visually guided movement. Sleep changes caused by enhanced or diminished allatostatinergic transmission from dFB neurons and by inhibition or optogenetic stimulation of helicon cells support this notion. Helicon cells provide excitation to R2 neurons of the ellipsoid body, whose activity-dependent plasticity signals rising sleep pressure to the dFB. By virtue of this autoregulatory loop, dFB-mediated inhibition interrupts processes that incur a sleep debt, allowing restorative sleep to rebalance the books. VIDEO ABSTRACT. Copyright © 2017 The Authors. Published by Elsevier Inc. All rights reserved.

Negative hydrogen ion production in a helicon plasma source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Santoso, J., E-mail: Jesse.Santoso@anu.edu.au; Corr, C. S.; Manoharan, R.

2015-09-15

In order to develop very high energy (>1 MeV) neutral beam injection systems for applications, such as plasma heating in fusion devices, it is necessary first to develop high throughput negative ion sources. For the ITER reference source, this will be realised using caesiated inductively coupled plasma devices, containing either hydrogen or deuterium discharges, operated with high rf input powers (up to 90 kW per driver). It has been suggested that due to their high power coupling efficiency, helicon devices may be able to reduce power requirements and potentially obviate the need for caesiation due to the high plasma densities achievable. Here,more » we present measurements of negative ion densities in a hydrogen discharge produced by a helicon device, with externally applied DC magnetic fields ranging from 0 to 8.5 mT at 5 and 10 mTorr fill pressures. These measurements were taken in the magnetised plasma interaction experiment at the Australian National University and were performed using the probe-based laser photodetachment technique, modified for the use in the afterglow of the plasma discharge. A peak in the electron density is observed at ∼3 mT and is correlated with changes in the rf power transfer efficiency. With increasing magnetic field, an increase in the negative ion fraction from 0.04 to 0.10 and negative ion densities from 8 × 10{sup 14 }m{sup −3} to 7 × 10{sup 15 }m{sup −3} is observed. It is also shown that the negative ion densities can be increased by a factor of 8 with the application of an external DC magnetic field.« less

Exhaust Plume Measurements of the VASIMR VX-200

NASA Astrophysics Data System (ADS)

Longmier, Benjamin; Bering, Edgar, III; Squire, Jared; Glover, Tim; Chang-Diaz, Franklin; Brukardt, Michael

2008-11-01

Recent progress is discussed in the development of an advanced RF electric propulsion concept: the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) VX-200 engine, a 200 kW flight-technology prototype. Results from high power Helicon only and Helicon with ICRH experiments are performed on the VX-200 using argon plasma. Recent measurements of axial plasma density and potential profiles, magnetic field-line shaping, charge exchange, and force measurements taken in the plume of the VX-200 exhaust are made within a new 125 cubic meter cryo-pumped vacuum chamber and are presented in the context of RF plasma thruster physics.

Nonlinear generation of sum and difference frequency waves by two helicon waves in a semiconductor

NASA Astrophysics Data System (ADS)

Salimullah, M.; Ferdous, T.

1984-05-01

This paper presents a theoretical investigation of the nonlinear generation of electrostatic waves at the sum and the difference frequency when two high amplitude elliptically polarized helicon waves propagate along the direction of the externally applied static magnetic field in an n-type semiconductor. The nonlinearity arises through the ponderomotive force on electrons. It is noticed that the power conversion efficiency of the difference frequency generation is much larger than that of the sum frequency generation. The power conversion efficiency may be easily increased by increasing the density of electrons in the semiconductor.

Axial momentum lost to a lateral wall of a helicon plasma source.

PubMed

Takahashi, Kazunori; Chiba, Aiki; Komuro, Atsushi; Ando, Akira

2015-05-15

Momentum exerted to a lateral wall of a helicon plasma source is individually measured for argon, krypton, and xenon gases. A significant loss of the axial plasma momentum to the lateral wall, which has been assumed to be negligible, is experimentally identified when an axially asymmetric density profile is formed in the source. This indicates that the radially lost ions deliver not only the radial momentum but also the axial momentum to the lateral wall. The formation of the axial asymmetry causing the momentum loss is interpreted with competition between the magnetic field and neutral depletion effects.

Direct thrust measurement of a permanent magnet helicon double layer thruster

DOE Office of Scientific and Technical Information (OSTI.GOV)

Takahashi, K.; Lafleur, T.; Charles, C.

2011-04-04

Direct thrust measurements of a permanent magnet helicon double layer thruster have been made using a pendulum thrust balance and a high sensitivity laser displacement sensor. At the low pressures used (0.08 Pa) an ion beam is detected downstream of the thruster exit, and a maximum thrust force of about 3 mN is measured for argon with an rf input power of about 700 W. The measured thrust is proportional to the upstream plasma density and is in good agreement with the theoretical thrust based on the maximum upstream electron pressure.

Nonlinear cross-field coupling on the route to broadband turbulence

NASA Astrophysics Data System (ADS)

Brandt, Christian; Thakur, Saikat C.; Cui, Lang; Gosselin, Jordan J.; Negrete, Jose, Jr.; Holland, Chris; Tynan, George R.

2013-10-01

In the linear magnetized plasma device CSDX (Controlled Shear De-correlation eXperiment) drift interchange modes are studied coexisting on top of a weak turbulence driven azimuthally symmetric, radially sheared plasma flow. In helicon discharges (helicon antenna diameter 15 cm) with increasing magnetic field (B <= 0 . 24 T) the system can be driven to fully developed broadband turbulence. Fast imaging using a refractive telescope setup is applied to study the dynamics in the azimuthal-radial cross-section. The image data is supported by Langmuir probe measurements. In the present study we examine the development of nonlinear transfer as the fully developed turbulence emerges. Nonlinear cross-field coupling between eigenmodes at different radial positions is investigated using Fourier decomposition of azimuthal eigenmodes. The coupling strength between waves at different radial positions is inferred to radial profiles and cross-field transport between adjacent magnetic flux surfaces. Nonlinear effects like synchronization, phase slippages, phase pulling and periodic pulling are observed. The effects of mode coupling and the stability of modes is compared to the dynamics of a coupled chain of Kuramoto oscillators.

Spectrometer Development in Support of Thomson Scattering Investigations for the Helicon Plasma Experiment (HPX)

NASA Astrophysics Data System (ADS)

Sandri, Eva; Davies, Richard; Azzari, Phil; Frank, John; Frank, Jackson; James, Royce; Hopson, Jordon; Duke-Tinson, Omar; Paolino, Richard; Sherman, Justin; Wright, Erin; Turk, Jeremy

2016-10-01

Now that reproducible plasmas have been created on the Helicon Plasma Experiment (HPX) at the Coast Guard Academy Plasma Laboratory (CGAPL), a high-performance spectrometer utilizing volume-phase-holographic (VPH) grating and a charge coupled device (CCD) camera with a range of 380-1090 nm and resolution of 1024x1024 is being assembled. This spectrometer will collect doppler shifted photons created by exciting the plasma with the first harmonic of a 2.5 J Nd:YAG laser at a wavelength of 1064 nm. Direct measurements of the plasma's temperature and density will be determined using HPX's Thomson Scattering (TS) system as a single spatial point diagnostic. TS has the capability of determining plasma properties on short time scales and will be used to create a robust picture of the internal plasma parameters. A prototype spectrometer has been constructed to explore the Andor CCD camera's resolution and sensitivity. Concurrently, through intensive study of the high energy TS system, safety protocols and standard operation procedures (SOP) for the Coast Guard's largest and most powerful Laser have been developed. The current status of the TS SOP, diagnostic development, and the collection optic's spectrometer will be reported. Supported by U.S. DEPS Grant [HEL-JTO] PRWJFY15-16.

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

NASA Technical Reports Server (NTRS)

Routh, D. E.; Sharma, G. C. (Inventor)

1982-01-01

The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps.

Directional power absorption in helicon plasma sources excited by a half-helix antenna

NASA Astrophysics Data System (ADS)

Afsharmanesh, Mohsen; Habibi, Morteza

2017-10-01

This paper deals with the investigation of the power absorption in helicon plasma excited through a half-helix antenna driven at 13.56 {{MHz}}. The simulations were carried out by means of a code, HELIC. They were carried out by taking into account different inhomogeneous radial density profiles and for a wide range of plasma densities, from {10}11 {{{cm}}}-3 to {10}13 {{{cm}}}-3. The magnetic field was 200, 400, 600 and 1000 {{G}}. A three-parameter function was used for generating various density profiles with different volume gradients, edge gradients and density widths. The density profile had a large effect on the efficient Trivelpiece-Gould (TG) and helicon mode excitation and antenna coupling to the plasma. The fraction of power deposition via the TG mode was extremely dependent on the plasma density near the plasma boundary. Interestingly, the obtained efficient parallel helicon wavelength was close to the anticipated value for Gaussian radial density profile. Power deposition was considerably asymmetric when the \\tfrac{n}{{B}0} ratio was more than a specific value for a determined density width. The longitudinal power absorption was symmetric at approximately {n}0={10}11 {{{cm}}}-3, irrespective of the magnetic field supposed. The asymmetry became more pronounced when the plasma density was {10}12 {{{cm}}}-3. The ratio of density width to the magnetic field was an important parameter in the power coupling. At high magnetic fields, the maximum of the power absorption was reached at higher plasma density widths. There was at least one combination of the plasma density, magnetic field and density width for which the RF power deposition at both side of the tube reached its maximum value.

Focus stacking: Comparing commercial top-end set-ups with a semi-automatic low budget approach. A possible solution for mass digitization of type specimens

PubMed Central

Brecko, Jonathan; Mathys, Aurore; Dekoninck, Wouter; Leponce, Maurice; VandenSpiegel, Didier; Semal, Patrick

2014-01-01

Abstract In this manuscript we present a focus stacking system, composed of commercial photographic equipment. The system is inexpensive compared to high-end commercial focus stacking solutions. We tested this system and compared the results with several different software packages (CombineZP, Auto-Montage, Helicon Focus and Zerene Stacker). We tested our final stacked picture with a picture obtained from two high-end focus stacking solutions: a Leica MZ16A with DFC500 and a Leica Z6APO with DFC290. Zerene Stacker and Helicon Focus both provided satisfactory results. However, Zerene Stacker gives the user more possibilities in terms of control of the software, batch processing and retouching. The outcome of the test on high-end solutions demonstrates that our approach performs better in several ways. The resolution of the tested extended focus pictures is much higher than those from the Leica systems. The flash lighting inside the Ikea closet creates an evenly illuminated picture, without struggling with filters, diffusers, etc. The largest benefit is the price of the set-up which is approximately € 3,000, which is 8 and 10 times less than the LeicaZ6APO and LeicaMZ16A set-up respectively. Overall, this enables institutions to purchase multiple solutions or to start digitising the type collection on a large scale even with a small budget. PMID:25589866

Focus stacking: Comparing commercial top-end set-ups with a semi-automatic low budget approach. A possible solution for mass digitization of type specimens.

PubMed

Brecko, Jonathan; Mathys, Aurore; Dekoninck, Wouter; Leponce, Maurice; VandenSpiegel, Didier; Semal, Patrick

2014-01-01

In this manuscript we present a focus stacking system, composed of commercial photographic equipment. The system is inexpensive compared to high-end commercial focus stacking solutions. We tested this system and compared the results with several different software packages (CombineZP, Auto-Montage, Helicon Focus and Zerene Stacker). We tested our final stacked picture with a picture obtained from two high-end focus stacking solutions: a Leica MZ16A with DFC500 and a Leica Z6APO with DFC290. Zerene Stacker and Helicon Focus both provided satisfactory results. However, Zerene Stacker gives the user more possibilities in terms of control of the software, batch processing and retouching. The outcome of the test on high-end solutions demonstrates that our approach performs better in several ways. The resolution of the tested extended focus pictures is much higher than those from the Leica systems. The flash lighting inside the Ikea closet creates an evenly illuminated picture, without struggling with filters, diffusers, etc. The largest benefit is the price of the set-up which is approximately € 3,000, which is 8 and 10 times less than the LeicaZ6APO and LeicaMZ16A set-up respectively. Overall, this enables institutions to purchase multiple solutions or to start digitising the type collection on a large scale even with a small budget.

Three-dimensional particle simulation of back-sputtered carbon in electric propulsion test facility

NASA Astrophysics Data System (ADS)

Zheng, Hongru; Cai, Guobiao; Liu, Lihui; Shang, Shengfei; He, Bijiao

2017-03-01

The back-sputtering deposition on thruster surface caused by ion bombardment on chamber wall material affects the performance of thrusters during the ground based electric propulsion endurance tests. In order to decrease the back-sputtering deposition, most of vacuum chambers applied in electric propulsion experiments are equipped with anti-sputtering targets. In this paper, a three-dimensional model of plume experimental system (PES) including double layer anti-sputtering target is established. Simulation cases are made to simulate the plasma environment and sputtering effects when an ion thruster is working. The particle in cell (PIC) method and direct simulation Monte Carlo (DSMC) method is used to calculate the velocity and position of particles. Yamamura's model is used to simulate the sputtering process. The distribution of sputtered anti-sputtering target material is presented. The results show that the double layer anti-sputtering target can significantly reduce the deposition on thruster surface. The back-sputtering deposition rates on thruster exit surface for different cases are compared. The chevrons on the secondary target are rearranged to improve its performance. The position of secondary target has relation with the ion beam divergence angle, and the radius of the vacuum chamber. The back-sputtering deposition rate is lower when the secondary target covers the entire ion beam.

Effect of Silver Dopants on the ZnO Thin Films Prepared by a Radio Frequency Magnetron Co-Sputtering System

PubMed Central

Liu, Fang-Cheng; Li, Jyun-Yong; Chen, Tai-Hong; Chang, Chun-How; Lee, Ching-Ting; Hsiao, Wei-Hua; Liu, Day-Shan

2017-01-01

Ag-ZnO co-sputtered films at various atomic ratios of Ag (Ag/(Ag + Zn) at.%) were prepared by a radio frequency magnetron cosputtering system, using the co-sputtered targets of Ag and ZnO. The activation of the Ag acceptors (AgZn) and the formation of the Ag aggregations (Ag0) in the ZnO matrix were investigated from XRD, Raman scattering, and XPS measurements. The Ag-ZnO co-sputtered film behaving like a p-type conduction was achievable after annealing at 350 °C under air ambient for 1 h. PMID:28773159

Development of ion beam sputtering techniques for actinide target preparation

NASA Astrophysics Data System (ADS)

Aaron, W. S.; Zevenbergen, L. A.; Adair, H. L.

1985-06-01

Ion beam sputtering is a routine method for the preparation of thin films used as targets because it allows the use of a minimum quantity of starting material, and losses are much lower than most other vacuum deposition techniques. Work is underway in the Isotope Research Materials Laboratory (IRML) at ORNL to develop the techniques that will make the preparation of actinide targets up to 100 μg/cm 2 by ion beam sputtering a routinely available service from IRML. The preparation of the actinide material in a form suitable for sputtering is a key to this technique, as is designing a sputtering system that allows the flexibility required for custom-ordered target production. At present, development work is being conducted on low-activity actinides in a bench-top system. The system will then be installed in a hood or glove box approved for radioactive materials handling where processing of radium, actinium, and plutonium isotopes among others will be performed.

On the sputter alteration of regoliths of outer solar system bodies

NASA Technical Reports Server (NTRS)

Hapke, B.

1986-01-01

The present theoretical and experimental consideration of processes that are expected to occur when the porous regoliths on outer solar system bodies lacking atmospheres are subjected to energetic ion bombardment indicates that porosity reduces the effective sputtering yield of a soil by more than an order of magnitude. Between 90 and 97 percent of the sputtered atoms are trapped within the regolith and subjected to differential desorption fractionation, which emerges as the most important path for the alteration of chemical and optical properties in sputtered regoliths. Sputtered porous mixtures of water, ammonia and methane frosts suffer a loss of H, and surface reactions of C, N, and O that should yield complex hydrocarbons and carbohydrates; such reactions may have played a role in the formation of carbonaceous chondrites' matrix material prior to agglomeration.

Continuous wave cavity ring down spectroscopy measurements of velocity distribution functions of argon ions in a helicon plasma.

PubMed

Chakraborty Thakur, Saikat; McCarren, Dustin; Carr, Jerry; Scime, Earl E

2012-02-01

We report continuous wave cavity ring down spectroscopy (CW-CRDS) measurements of ion velocity distribution functions (VDFs) in low pressure argon helicon plasma (magnetic field strength of 600 G, T(e) ≈ 4 eV and n ≈ 5 × 10(11) cm(-3)). Laser induced fluorescence (LIF) is routinely used to measure VDFs of argon ions, argon neutrals, helium neutrals, and xenon ions in helicon sources. Here, we describe a CW-CRDS diagnostic based on a narrow line width, tunable diode laser as an alternative technique to measure VDFs in similar regimes but where LIF is inapplicable. Being an ultra-sensitive, cavity enhanced absorption spectroscopic technique; CW-CRDS can also provide a direct quantitative measurement of the absolute metastable state density. The proof of principle CW-CRDS measurements presented here are of the Doppler broadened absorption spectrum of Ar II at 668.6138 nm. Extrapolating from these initial measurements, it is expected that this diagnostic is suitable for neutrals and ions in plasmas ranging in density from 1 × 10(9) cm(-3) to 1 × 10(13) cm(-3) and target species temperatures less than 20 eV.

Experimental observation of ion beams in the Madison Helicon eXperiment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wiebold, Matt; Sung, Yung-Ta; Scharer, John E.

2011-06-15

Argon ion beams up to E{sub b} = 165 eV at P{sub rf} = 500 W are observed in the Madison Helicon eXperiment (MadHeX) helicon source with a magnetic nozzle. A two-grid retarding potential analyzer (RPA) is used to measure the ion energy distribution, and emissive and rf-filtered Langmuir probes measure the plasma potential, electron density, and temperature. The supersonic ion beam (M = v{sub i}/c{sub s} up to 5) forms over tens of Debye lengths and extends spatially for a few ion-neutral charge-exchange mean free paths. The parametric variation of the ion beam energy is explored, including flow rate,more » rf power, and magnetic field dependence. The beam energy is equal to the difference in plasma potentials in the Pyrex chamber and the grounded expansion chamber. The plasma potential in the expansion chamber remains near the predicted eV{sub p} {approx} 5kT{sub e} for argon, but the upstream potential is much higher, likely due to wall charging, resulting in accelerated ion beam energies E{sub b} = e[V{sub beam} - V{sub plasma}] > 10kT{sub e}.« less

Continuous wave cavity ring down spectroscopy measurements of velocity distribution functions of argon ions in a helicon plasma

NASA Astrophysics Data System (ADS)

Chakraborty Thakur, Saikat; McCarren, Dustin; Carr, Jerry; Scime, Earl E.

2012-02-01

We report continuous wave cavity ring down spectroscopy (CW-CRDS) measurements of ion velocity distribution functions (VDFs) in low pressure argon helicon plasma (magnetic field strength of 600 G, Te ≈ 4 eV and n ≈ 5 × 1011 cm-3). Laser induced fluorescence (LIF) is routinely used to measure VDFs of argon ions, argon neutrals, helium neutrals, and xenon ions in helicon sources. Here, we describe a CW-CRDS diagnostic based on a narrow line width, tunable diode laser as an alternative technique to measure VDFs in similar regimes but where LIF is inapplicable. Being an ultra-sensitive, cavity enhanced absorption spectroscopic technique; CW-CRDS can also provide a direct quantitative measurement of the absolute metastable state density. The proof of principle CW-CRDS measurements presented here are of the Doppler broadened absorption spectrum of Ar II at 668.6138 nm. Extrapolating from these initial measurements, it is expected that this diagnostic is suitable for neutrals and ions in plasmas ranging in density from 1 × 109 cm-3 to 1 × 1013 cm-3 and target species temperatures less than 20 eV.

Measurement of plasma momentum exerted on target by a small helicon plasma thruster and comparison with direct thrust measurement.

PubMed

Takahashi, Kazunori; Komuro, Atsushi; Ando, Akira

2015-02-01

Momentum, i.e., force, exerted from a small helicon plasma thruster to a target plate is measured simultaneously with a direct thrust measurement using a thrust balance. The calibration coefficient relating a target displacement to a steady-state force is obtained by supplying a dc to a calibration coil mounted on the target, where a force acting to a small permanent magnet located near the coil is directly measured by using a load cell. As the force exerted by the plasma flow to the target plate is in good agreement with the directly measured thrust, the validity of the target technique is demonstrated under the present operating conditions, where the thruster is operated in steady-state. Furthermore, a calibration coefficient relating a swing amplitude of the target to an impulse bit is also obtained by pulsing the calibration coil current. The force exerted by the pulsed plasma, which is estimated from the measured impulse bit and the pulse width, is also in good agreement with that obtained for the steady-state operation; hence, the thrust assessment of the helicon plasma thruster by the target is validated for both the steady-state and pulsed operations.

Three Dimensional Imaging of Helicon Wave Fields Via Magnetic Induction Probes

DTIC Science & Technology

2009-07-13

Elastomer Flange 50 The chamber is pumped by a Varian TV-300 HT turbomolecular vacuum pump with a pumping speed of 250 l/s backed by a dry scroll ... vacuum diffusion chamber with pump locations .................................................. 49 Figure 3.2. RF power delivery system...steel, 0.5 meter diameter by 1.0 meter long vacuum chamber. It has 24 access ports / flanges of varying diameter for diagnostic feed-throughs, pumping

Sputtered Pd as hydrogen storage for a chip-integrated microenergy system.

PubMed

Slavcheva, E; Ganske, G; Schnakenberg, U

2014-01-01

The work presents a research on preparation and physical and electrochemical characterisation of dc magnetron sputtered Pd films envisaged for application as hydrogen storage in a chip-integrated hydrogen microenergy system. The influence of the changes in the sputtering pressure on the surface structure, morphology, and roughness was analysed by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AMF). The electrochemical activity towards hydrogen adsorption/desorption and formation of PdH were investigated in 0.5 M H2SO4 using the methods of cyclic voltammetry and galvanostatic polarisation. The changes in the electrical properties of the films as a function of the sputtering pressure and the level of hydrogenation were evaluated before and immediately after the electrochemical charging tests, using a four-probe technique. The research resulted in establishment of optimal sputter regime, ensuring fully reproducible Pd layers with highly developed surface, moderate porosity, and mechanical stability. Selected samples were integrated as hydrogen storage in a newly developed unitized microenergy system and tested in charging (water electrolysis) and discharging (fuel cell) operative mode at ambient conditions demonstrating a stable recycling performance.

Deposition of adherent Ag-Ti duplex films on ceramics in a multiple-cathode sputter deposition system

NASA Technical Reports Server (NTRS)

Honecy, Frank S.

1992-01-01

The adhesion of Ag films deposited on oxide ceramics can be increased by first depositing intermediate films of active metals such as Ti. Such duplex coatings can be fabricated in a widely used three target sputter deposition system. It is shown here that the beneficial effect of the intermediate Ti film can be defeated by commonly used in situ target and substrate sputter cleaning procedures which result in Ag under the Ti. Auger electron spectroscopy and wear testing of the coatings are used to develop a cleaning strategy resulting in an adherent film system.

High Power Electric Propulsion Using The VASIMR VX-200: A Flight Technology Prototype

NASA Astrophysics Data System (ADS)

Bering, Edgar, III; Longmier, Benjamin; Glover, Tim; Chang-Diaz, Franklin; Squire, Jared; Brukardt, Michael

2008-11-01

The Variable Specific Impulse Magnetoplasma Rocket (VASIMR) is a high power magnetoplasma rocket, capable of Isp/thrust modulation at constant power. The plasma is produced by a helicon discharge. The bulk of the energy is added by ion cyclotron resonance heating (ICRH.) Axial momentum is obtained by adiabatic expansion of the plasma in a magnetic nozzle. Thrust/specific impulse ratio control in the VASIMR is primarily achieved by the partitioning of the RF power to the helicon and ICRH systems, with the proper adjustment of the propellant flow. Ion dynamics in the exhaust were studied using probes, gridded energy analyzers (RPA's), microwave interferometry and optical techniques. Results are summarize from high power ICRH experiments performed on the VX-100 using argon plasma during 2007, and on the VX-200 using argon plasma during 2008. The VX-100 has demonstrated ICRH antenna efficiency >90% and a total coupling efficiency of ˜75%. The rocket performance parameters inferred by integrating the moments of the ion energy distribution corresponds to a thrust of 2 N at an exhaust velocity of 20 km/s with the VX-100 device. The new VX-200 machine is described.

Investigation of a Light Gas Helicon Plasma Source for the VASIMR Space Propulsion System

NASA Technical Reports Server (NTRS)

Squire, J. P.; Chang-Diaz, F. R.; Jacobson, V. T.; Glover, T. W.; Baity, F. W.; Carter, M. D.; Goulding, R. H.; Bengtson, R. D.; Bering, E. A., III

2003-01-01

An efficient plasma source producing a high-density (approx.10(exp 19/cu m) light gas (e.g. H, D, or He) flowing plasma with a high degree of ionization is a critical component of the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) concept. We are developing an antenna to apply ICRF power near the fundamental ion cyclotron resonance to further accelerate the plasma ions to velocities appropriate for space propulsion applications. The high degree of ionization and a low vacuum background pressure are important to eliminate the problem of radial losses due to charge exchange. We have performed parametric (e.g. gas flow, power (0.5 - 3 kW), magnetic field , frequency (25 and 50 MHz)) studies of a helicon operating with gas (H2 D2, He, N2 and Ar) injected at one end with a high magnetic mirror downstream of the antenna. We have explored operation with a cusp and a mirror field upstream. Plasma flows into a low background vacuum (<10(exp -4) torr) at velocities higher than the ion sound speed. High densities (approx. 10(exp 19/cu m) have been achieved at the location where ICRF will be applied, just downstream of the magnetic mirror.

Neutral-depletion-induced axially asymmetric density in a helicon source and imparted thrust

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Takao, Yoshinori; Ando, Akira

2016-02-01

The high plasma density downstream of the source is observed to be sustained only for a few hundreds of microsecond at the initial phase of the discharge, when pulsing the radiofrequency power of a helicon plasma thruster. Measured relative density of argon neutrals inside the source implies that the neutrals are significantly depleted there. A position giving a maximum plasma density temporally moves to the upstream side of the source due to the neutral depletion and then the exhausted plasma density significantly decreases. The direct thrust measurement demonstrates that the higher thrust-to-power ratio is obtained by using only the initial phase of the high density plasma, compared with the steady-state operation.

Modified transverse phonon-helicon interaction in colloids laden semiconductor plasmas due to Bohm potential and Fermi degenerate pressure

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sharma, Aartee, E-mail: aartee.sharma08@gmail.com; Yadav, N.; Ghosh, S.

2015-07-31

A detailed study of the quantum modification of acousto-helicon wave spectra due to Bohm potential and Fermi degenerate pressure in colloids laden semiconductor plasma has been presented. We have used quantum hydrodynamic model of plasmas to arrive at most general dispersion relation in presence of magnetic field. This dispersion relation has been analyzed in three different velocity regimes and the expressions for gain constants have been obtained. From the present study it has been concluded that the quantum effect and the magnetic field significantly modify the wave characteristics particularly in high doping regime in semiconductor plasma medium in presence ofmore » colloids in it.« less

Influence of in-situ ion-beam sputter cleaning on the conditioning effect of vacuum gaps

NASA Astrophysics Data System (ADS)

Kobayashi, Shinichi; Kojima, Hiroyuki; Saito, Yoshio

1994-05-01

An ion beam sputtering technique was used to clean the electrode surfaces of vacuum gaps. Ions of the sputtering gas were irradiated by means of an ion gun in a vacuum chamber attached to a breakdown measurement chamber. By providing in situ ion-beam sputter cleaning, this system makes it possible to make measurements free from contamination due to exposure to the air. The sputtering gas was He or Ar, and the electrodes were made of oxygen-free copper (purity more than 99.96%). An impulse voltage with the wave form of 64/700 microsecond(s) was applied to the test gap, and the pressure in the breakdown measurement chamber at the beginning of breakdown tests was 1.3 X 10-8 Pa. These experiments showed that ion-beam sputter cleaning results in higher breakdown fields after a repetitive breakdown conditioning procedure, and that He is more effective in improving hold- off voltages after the conditioning (under the same ion current density, the breakdown field was 300 MV/m for He sputtering and 200 MV/m for Ar sputtering). The breakdown fields at the first voltage application after the sputtering cleaning, on the other hand, were not improved.

Developing the science and technology for the Material Plasma Exposure eXperiment

NASA Astrophysics Data System (ADS)

Rapp, J.; Biewer, T. M.; Bigelow, T. S.; Caneses, J. F.; Caughman, J. B. O.; Diem, S. J.; Goulding, R. H.; Isler, R. C.; Lumsdaine, A.; Beers, C. J.; Bjorholm, T.; Bradley, C.; Canik, J. M.; Donovan, D.; Duckworth, R. C.; Ellis, R. J.; Graves, V.; Giuliano, D.; Green, D. L.; Hillis, D. L.; Howard, R. H.; Kafle, N.; Katoh, Y.; Lasa, A.; Lessard, T.; Martin, E. H.; Meitner, S. J.; Luo, G.-N.; McGinnis, W. D.; Owen, L. W.; Ray, H. B.; Shaw, G. C.; Showers, M.; Varma, V.; the MPEX Team

2017-11-01

Linear plasma generators are cost effective facilities to simulate divertor plasma conditions of present and future fusion reactors. They are used to address important R&D gaps in the science of plasma material interactions and towards viable plasma facing components for fusion reactors. Next generation plasma generators have to be able to access the plasma conditions expected on the divertor targets in ITER and future devices. The steady-state linear plasma device MPEX will address this regime with electron temperatures of 1-10 eV and electron densities of 1021{\\text{}}-1020 m-3 . The resulting heat fluxes are about 10 MW m-2 . MPEX is designed to deliver those plasma conditions with a novel Radio Frequency plasma source able to produce high density plasmas and heat electron and ions separately with electron Bernstein wave (EBW) heating and ion cyclotron resonance heating with a total installed power of 800 kW. The linear device Proto-MPEX, forerunner of MPEX consisting of 12 water-cooled copper coils, has been operational since May 2014. Its helicon antenna (100 kW, 13.56 MHz) and EC heating systems (200 kW, 28 GHz) have been commissioned and 14 MW m-2 was delivered on target. Furthermore, electron temperatures of about 20 eV have been achieved in combined helicon and ECH heating schemes at low electron densities. Overdense heating with EBW was achieved at low heating powers. The operational space of the density production by the helicon antenna was pushed up to 1.1 × 1020 m-3 at high magnetic fields of 1.0 T at the target. The experimental results from Proto-MPEX will be used for code validation to enable predictions of the source and heating performance for MPEX. MPEX, in its last phase, will be capable to expose neutron-irradiated samples. In this concept, targets will be irradiated in ORNL’s High Flux Isotope Reactor and then subsequently exposed to fusion reactor relevant plasmas in MPEX.

Current-free double layers: A review

NASA Astrophysics Data System (ADS)

Singh, Nagendra

2011-12-01

During the last decade, there has been an upsurge in the research on current-free DLs (CFDLs). Research includes theory, laboratory measurements, and various applications of CFDLs ranging from plasma thrusters to acceleration of charged particles in space and astrophysical plasmas. The purpose of this review is to present a unified understanding of the basic plasma processes, which lead to the formation of CFDLs. The review starts with the discussion on early research on electric fields and double layers (DLs) and ion acceleration in planar plasma expansion. The review continues with the formation of DLs and rarefaction shocks (RFS) in expanding plasma with two electron populations with different temperatures. The basic theory mitigating the formation of a CFDL by two-electron temperature population is reviewed; we refer to such CFDLs as double layers structures formation by two-temperature electron populations (TET-CFDLs). Application of TET-CFDLS to ion acceleration in laboratory and space plasmas was discussed including the formation of stationary steady-state DLs. A quite different type of CFDLs forms in a helicon plasma device (HPD), in which plasma abruptly expands from a narrow plasma source tube into a wide diffusion tube with abruptly diverging magnetic fields. The formation mechanism of the CFDL in HPD, referred here as current free double layer structure in helicon plasma device (HPD-CFDL), and its applications are reviewed. The formation of a TET-CFDL is due to the self-consistent separation of the two electron populations parallel to the ambient magnetic field. In contrast, a HPD-CFDL forms due to self-consistent separation of electrons and ion perpendicular to the abruptly diverging magnetic field in conjunction with the conducting wall of the expansion chamber in the HPD. One-dimensional theoretical models of CFDLs based on steady-state solution of Vlasov-Poisson system of equations are briefly discussed. Applications of CFDLs ranging from helicon double-layer thrusters (HDLTs) to the accelerations of ions in space and astrophysical plasmas are summarized.

Heavy particle transport in sputtering systems

NASA Astrophysics Data System (ADS)

Trieschmann, Jan

2015-09-01

This contribution aims to discuss the theoretical background of heavy particle transport in plasma sputtering systems such as direct current magnetron sputtering (dcMS), high power impulse magnetron sputtering (HiPIMS), or multi frequency capacitively coupled plasmas (MFCCP). Due to inherently low process pressures below one Pa only kinetic simulation models are suitable. In this work a model appropriate for the description of the transport of film forming particles sputtered of a target material has been devised within the frame of the OpenFOAM software (specifically dsmcFoam). The three dimensional model comprises of ejection of sputtered particles into the reactor chamber, their collisional transport through the volume, as well as deposition of the latter onto the surrounding surfaces (i.e. substrates, walls). An angular dependent Thompson energy distribution fitted to results from Monte-Carlo simulations is assumed initially. Binary collisions are treated via the M1 collision model, a modified variable hard sphere (VHS) model. The dynamics of sputtered and background gas species can be resolved self-consistently following the direct simulation Monte-Carlo (DSMC) approach or, whenever possible, simplified based on the test particle method (TPM) with the assumption of a constant, non-stationary background at a given temperature. At the example of an MFCCP research reactor the transport of sputtered aluminum is specifically discussed. For the peculiar configuration and under typical process conditions with argon as process gas the transport of aluminum sputtered of a circular target is shown to be governed by a one dimensional interaction of the imposed and backscattered particle fluxes. The results are analyzed and discussed on the basis of the obtained velocity distribution functions (VDF). This work is supported by the German Research Foundation (DFG) in the frame of the Collaborative Research Centre TRR 87.

On the sputter alteration of regoliths of outer solar system bodies

NASA Technical Reports Server (NTRS)

Hapke, Bruce

1987-01-01

Several processes that are expected to occur when the porous regoliths of outer solar system bodies (without atmospheres) are subjected to energetic ion bombardment are discussed. The conclusions reached in much of the literature addressing sputtering are quantitatively or qualitatively incorrect because effects of soil porosity have been neglected. It is shown theoretically and experimentally that porosity reduces the effective sputtering yield of a soil by more than an order of magnitude. Between 90 and 97% of the sputtered atoms are trapped within the regolith, where they are factionated by differential desorption. Experiments indicate that more volatile species have higher desorption probabilities. This process is the most important way in which alteration of chemical and optical properties occurs when a regolith is sputtered. When a basic silicate soil is irradiated these effects lead to sputter-deposited films enriched in metallic iron, while O, Na and K are preferentially lost. The Na and K are present in the atmosphere above the sputtered silicate in quantities much greater than their abundances in the regolith. Icy regoliths of SO2 should be enriched in elemental S and/or S2O. This prediction is supported by the probable identification of S2O and polysulfur oxide bands in the IR spectra of H-sputtered SO2 reported by Moore. When porous mixtures of water, ammonia and methane frosts are sputtered, the loss of H and surface reactions of C, N and O in the deposits should produce complex hydrocarbons and carbohydrates, some of which may be quite dark. Such reactions may have played a role in the formation of the matrix material of carbonaceous chondrites prior to agglomeration.

Two density peaks in low magnetic field helicon plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Y.; Zhao, G.; Ouyang, J. T., E-mail: jtouyang@bit.edu.cn, E-mail: lppmchenqiang@hotmail.com

2015-09-15

In this paper, we report two density peaks in argon helicon plasma under an axial magnetic field from 0 G to 250 G with Boswell-type antenna driven by radio frequency (RF) power of 13.56 MHz. The first peak locates at 40–55 G and the second one at 110–165 G, as the RF power is sustainably increased from 100 W to 250 W at Ar pressure of 0.35 Pa. The absorbed power of two peaks shows a linear relationship with the magnetic field. End views of the discharge taken by intensified charge coupled device reveal that, when the first peak appeared, the discharge luminance moves to the edge ofmore » the tube as the magnetic field increases. For the second peak, the strong discharge area is centered at the two antenna legs after the magnetic field reaches a threshold value. Comparing with the simulation, we suggest that the efficient power absorption of two peaks at which the efficient power absorption mainly appears in the near-antenna region is due to the mode conversion in bounded non-uniform helicon plasma. The two low-field peaks are caused, to some extent, by the excitation of Trivelpiece-Gould wave through non-resonance conversion.« less

Parametric Instabilities During High Power Helicon Wave Injection on DIII-D

NASA Astrophysics Data System (ADS)

Porkolab, M.; Pinsker, R. I.

2017-10-01

High power helicon (whistler) waves at a frequency of 0.47 GHz are being considered for efficient off-axis current generation in high performance DIII-D plasmas and in K-Star [3]. The need for deploying helicon waves for current profile control has been noted in previous publications since penetration to the core of reactor grade plasmas is easier than with lower hybrid slow waves (LHCD) which suffer from accessibility limitations and strong electron Landau absorption in fusion grade high temperature plasmas. In this work we show that under typical experimental conditions in present day tokamaks with 1 MW of RF power coupled per antenna, the associated perpendicular electric fields of the order of 40 kV/m can drive strong parametric decay instabilities near the lower hybrid layer. The EXB and polarization drift velocities which are the dominant driver of the PDI can be comparable to the speed of sound in the outer plasma layers, a key measure of driving PDI instabilities. Here we calculate growth rates and convective thresholds for PDIs, and we find that decay waves into hot ion lower hybrid waves and ion cyclotron quasi modes dominate in the vicinity of the lower hybrid layer, possibly leading to pump depletion. Such instabilities in future reactor grade high temperature plasmas are less likely.

Role of ion magnetization in formation of radial density profile in magnetically expanding plasma produced by helicon antenna

NASA Astrophysics Data System (ADS)

Yadav, Sonu; Ghosh, Soumen; Bose, Sayak; Barada, Kshitish K.; Pal, Rabindranath; Chattopadhyay, Prabal K.

2018-04-01

Experimentally, the density profile in the magnetic nozzle of a helicon antenna based plasma device is seen to be modified from being centrally peaked to that of hollow nature as the external magnetic field is increased. It occurs above a characteristic field value when the ions become magnetized in the expansion chamber. The density profile in the source chamber behind the nozzle, however, remains peaked on-axis irrespective of the magnetic field. The electron temperature there is observed to be hollow and this nature is carried to the expansion chamber along the field line. In the electron energy distribution near the off axis peak location, a high energy tail exists. Rotation of these tail electrons in the azimuthal direction due to the gradient-B drift in the expansion chamber leads to an additional off-axis ionization and forms the hollow density profile. It seems that if the ions are not magnetized, then the off-axially produced additional plasma is not confined and the density profile retains the on-axis peak nature. The present experiment successfully demonstrates how the knowledge of the ion magnetization together with tail electrons significantly contributes to the design of an efficient helicon plasma based thruster.

Operation of the ORNL High Particle Flux Helicon Plasma Source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goulding, R. H.; Biewer, T. M.; Caughman, J. B. O.

2011-12-23

A high power, high particle flux rf-based helicon plasma source has been constructed at ORNL and operated at power levels up to 30 kW. High-density hydrogen and helium plasmas have been produced. The source has been designed as the basis for a linear plasma materials interaction (PMI) test facility that will generate particle fluxes {Gamma}{sub p}10{sup 23} m{sup -3} s{sup -1}, and utilize additional ion and electron cyclotron heating to produce high parallel (to the magnetic field) heat fluxes of {approx}10 MW/m{sup 2}. An rf-based source for PMI research is of interest because high plasma densities are generated with nomore » internal electrodes, allowing true steady state operation with minimal impurity generation. The ORNL helicon source has a diameter of 15 cm and to-date has operated at a frequency f = 13.56 MHz, with magnetic field strength |B| in the antenna region up to {approx}0.15 T. Maximum densities of 3x10{sup 19} m{sup -3} in He and 2.5x10{sup 19} m{sup -3} in H have been achieved. Radial density profiles have been seen to be dependent on the axial |B| profile.« less

Performance characterization of a permanent-magnet helicon plasma thruster

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Charles, Christine; Boswell, Rod

2012-10-01

Helicon plasma thrusters operated at a few kWs of rf power is an active area of an international research. Recent experiments have clarified part of the thrust-generation mechanisms. Thrust components which have been identified include an electron pressure inside the source region and a Lorentz force due to an electron diamagnetic drift current and a radial component of the applied magnetic field. The use of permanent magnets (PMs) instead of solenoids is one of the solutions for improving the thruster efficiency because it does not require electricity for the magnetic nozzle formation. Here the thrust imparted from a permanent-magnet helicon plasma thruster is directly measured using a pendulum thrust balance. The source consists of permanent magnet (PM) arrays, a double turn rf loop antenna powered by a 13.56 MHz rf generator and a glass source tube. The PM arrays provide a magnetic nozzle near the open exit of the source and two configurations, which have maximum field strengths of about 100 and 270 G, are tested. A thrust of 15 mN, specific impulse of 2000 sec and a thrust efficiency of 8 percent are presently obtained for 2 kW of input power, 24 sccm flow rate of argon and the stronger magnetic field configuration.

Operation of the ORNL High Particle Flux Helicon Plasma Source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goulding, Richard Howell; Biewer, Theodore M; Caughman, John B

2011-01-01

A high power, high particle flux rf-based helicon plasma source has been constructed at ORNL and operated at power levels up to 30 kW. High-density hydrogen and helium plasmas have been produced. The source has been designed as the basis for a linear plasma materials interaction (PMI) test facility that will generate particle fluxes Gamma(p) > 10(23) M-3 s(-1), and utilize additional ion and electron cyclotron heating to produce high parallel (to the magnetic field) heat fluxes of similar to 10 MW/m(2). An rf-based source for PMI research is of interest because high plasma densities are generated with no internalmore » electrodes, allowing true steady state operation with minimal impurity generation. The ORNL helicon source has a diameter of 15 cm and to-date has operated at a frequency f = 13.56 MHz, with magnetic field strength vertical bar B vertical bar in the antenna region up to similar to 0.15 T. Maximum densities of 3 x 10(19) M-3 in He and 2.5 x 10(19) m(-3) in H have been achieved. Radial density profiles have been seen to be dependent on the axial vertical bar B vertical bar profile.« less

Evidence of current free double layer in high density helicon discharge

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ganguli, A.; Sahu, B. B.; Tarey, R. D.

2013-01-15

This paper investigates the formation of double layer (DL) in helicon plasmas. In the experiment, argon plasma production is using the excitation of m = -1 helicon mode with magnetic mirror field with high mirror ratio of {approx}1:1.7. We have specifically used the radio frequency compensated Langmuir probe (LP) to measure the relevant plasma parameters simultaneously so as to investigate the details about the plasma production. The DL, which consists of both warm and bulk populations towards higher potential region and only dense bulk plasmas towards the lower potential region downstream the antenna, is present in the transition region. LPmore » measurements also show an abrupt fall of density along with a potential drop of about 20 V and (e {Delta}V{sub p}/k T{sub e}) Almost-Equal-To 12 within a few cm. The potential drop is equal to the difference of the electron temperatures between the two plasma regions forming the DL, which is present in the plateau region of mirror, unlike in several prior studies on the DL formation in the region of strong gradients in the magnetic field. The DL is strong, current-free, electric double-layer with estimated thickness of about 10 Debye lengths.« less

Using AORSA to simulate helicon waves in DIIID and ITER

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lau, Cornwall H; Jaeger, E. F.; Berry, Lee Alan

2014-01-01

Recent efforts by Vdovin [1] and Prater [2] have shown that helicon waves (fast waves at ~30 ion cyclotron frequency harmonic) may be an attractive option for driving efficient off-axis current drive during non-inductive tokamak operation for DIIID, ITER and DEMO. For DIIID scenarios, the ray tracing code GENRAY has been extensively used to study helicon current drive efficiency and location as a function many plasma parameters. has some limitations on absorption at high cyclotron harmonics, so the full wave code AORSA, which is applicable to arbitrary Larmor radius and can therefore resolve high ion cyclotron harmonics, has been recentlymore » used to validate the GENRAY model. It will be shown that the GENRAY and AORSA driven current drive profiles are comparable for the envisioned high temperature and density advanced scenarios for DIIID, where there is high single pass absorption due to electron Landau damping. AORSA results will be shown for various plasma parameters for DIIID and for ITER. Computational difficulties in achieving these AORSA results will also be discussed. * Work supported by USDOE Contract No. DE-AC05-00OR22725 [1] V. L. Vdovin, Plasma Physics Reports, V.39, No.2, 2013 [2] R. Prater et al, Nucl. Fusion, 52, 083024, 2014« less

Plasma flow measurements in the Prototype-Material Plasma Exposure eXperiment (Proto-MPEX) and comparison with B2.5-Eirene modeling

NASA Astrophysics Data System (ADS)

Kafle, N.; Owen, L. W.; Caneses, J. F.; Biewer, T. M.; Caughman, J. B. O.; Donovan, D. C.; Goulding, R. H.; Rapp, J.

2018-05-01

The Prototype Material Plasma Exposure eXperiment (Proto-MPEX) at Oak Ridge National Laboratory is a linear plasma device that combines a helicon plasma source with additional microwave and radio frequency heating to deliver high plasma heat and particle fluxes to a target. Double Langmuir probes and Thomson scattering are being used to measure local electron temperature and density at various radial and axial locations. A recently constructed Mach-double probe provides the added capability of simultaneously measuring electron temperatures ( T e), electron densities ( n e), and Mach numbers (M). With this diagnostic, it is possible to infer the plasma flow, particle flux, and heat flux at different locations along the plasma column in Proto-MPEX. Preliminary results show Mach numbers of 0.5 (towards the dump plate) and 1.0 (towards the target plate) downstream from the helicon source, and a stagnation point (no flow) near the source for the case where the peak magnetic field was 1.3 T. Measurements of particle flow and ne and Te profiles are discussed. The extensive coverage provided by these diagnostics permits data-constrained B2.5-Eirene modeling of the entire plasma column, and comparison with results of modeling in the high-density helicon plasmas will be presented.

Magnetically attached sputter targets

DOEpatents

Makowiecki, D.M.; McKernan, M.A.

1994-02-15

An improved method and assembly for attaching sputtering targets to cathode assemblies of sputtering systems which includes a magnetically permeable material is described. The magnetically permeable material is imbedded in a target base that is brazed, welded, or soldered to the sputter target, or is mechanically retained in the target material. Target attachment to the cathode is achieved by virtue of the permanent magnets and/or the pole pieces in the cathode assembly that create magnetic flux lines adjacent to the backing plate, which strongly attract the magnetically permeable material in the target assembly. 11 figures.

Magnetically attached sputter targets

DOEpatents

Makowiecki, Daniel M.; McKernan, Mark A.

1994-01-01

An improved method and assembly for attaching sputtering targets to cathode assemblies of sputtering systems which includes a magnetically permeable material. The magnetically permeable material is imbedded in a target base that is brazed, welded, or soldered to the sputter target, or is mechanically retained in the target material. Target attachment to the cathode is achieved by virtue of the permanent magnets and/or the pole pieces in the cathode assembly that create magnetic flux lines adjacent to the backing plate, which strongly attract the magnetically permeable material in the target assembly.

Metal-Insulator-Metal Diode Process Development for Energy Harvesting Applications

DTIC Science & Technology

2010-04-01

Sputter Tool Dep Method: Sputtering (DC Magnetron ) Recipe: MC_Pt 1640A_TiO2 1000A_Ti 2000A_500C_1a MC_Pt 1640A_TiO2 1000A_Ti 2000A_300C_1a MC_Pt...thin films were sputtered onto silicon substrates with silicon dioxide overlayers. I-V measurements were taken using an electrical characterization...deposition of the entire MIM material stack to be done without breaking the vacuum within a multi-material system DC sputtering tool. A CAD layout of a MIM

Radiofrequency-sputtered coatings for lubrication system components and other complex surfaces

NASA Technical Reports Server (NTRS)

Spalvins, T.

1972-01-01

Irregularly shaped surfaces, such as lubrication system components (ball bearings, seals, gears, etc.), can be coated on all surfaces, including irregular shapes, when radiofrequency sputtering is used. When the specimen is properly located with respect to the sputtering target, the sputtered material covers the entire surface of the object irrespective of its geometrical configuration. An adherent, dense film is formed. The film thickness varies from 20 to 50 percent on, for example, a hearing cage or race depending on its geometry. When sputtered solid film lubricants such as molybdenum disulfide are used, a film thickness only of the order of 10 to the minus 7th power m (thousands of angstroms) is required at the contacting areas. It is only essential to determine the required film thickness at the critical areas in need of lubrication. The sections outside the areas to be lubricated fall within the thickness deviation range of 20 to 50 percent, which still constitutes a negligible change respect to tolerance requirements.

Using the Multipole Resonance Probe to Stabilize the Electron Density During a Reactive Sputter Process

NASA Astrophysics Data System (ADS)

Oberberg, Moritz; Styrnoll, Tim; Ries, Stefan; Bienholz, Stefan; Awakowicz, Peter

2015-09-01

Reactive sputter processes are used for the deposition of hard, wear-resistant and non-corrosive ceramic layers such as aluminum oxide (Al2O3) . A well known problem is target poisoning at high reactive gas flows, which results from the reaction of the reactive gas with the metal target. Consequently, the sputter rate decreases and secondary electron emission increases. Both parameters show a non-linear hysteresis behavior as a function of the reactive gas flow and this leads to process instabilities. This work presents a new control method of Al2O3 deposition in a multiple frequency CCP (MFCCP) based on plasma parameters. Until today, process controls use parameters such as spectral line intensities of sputtered metal as an indicator for the sputter rate. A coupling between plasma and substrate is not considered. The control system in this work uses a new plasma diagnostic method: The multipole resonance probe (MRP) measures plasma parameters such as electron density by analyzing a typical resonance frequency of the system response. This concept combines target processes and plasma effects and directly controls the sputter source instead of the resulting target parameters.

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

DOE Office of Scientific and Technical Information (OSTI.GOV)

Anders, André

High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines magnetron sputtering with pulsed power concepts. Furthermore, by applying power in pulses of high amplitude and a relatively low duty cycle, large fractions of sputtered atoms and near-target gases are ionized. In contrast to conventional magnetron sputtering, HiPIMS is characterized by self-sputtering or repeated gas recycling for high and low sputter yield materials, respectively, and both for most intermediate materials. The dense plasma in front of the target has the dual function of sustaining the discharge and providing plasma-assistance to film growth, affecting the microstructure of growing films.more » Many technologically interesting thin films are compound films, which are composed of one or more metals and a reactive gas, most often oxygen or nitrogen. When reactive gas is added, non-trivial consequences arise for the system because the target may become “poisoned,” i.e., a compound layer forms on the target surface affecting the sputtering yield and the yield of secondary electron emission and thereby all other parameters. It is emphasized that the target state depends not only on the reactive gas' partial pressure (balanced via gas flow and pumping) but also on the ion flux to the target, which can be controlled by pulse parameters. This is a critical technological opportunity for reactive HiPIMS (R-HiPIMS). The scope of this tutorial is focused on plasma processes and mechanisms of operation and only briefly touches upon film properties. It introduces R-HiPIMS in a systematic, step-by-step approach by covering sputtering, magnetron sputtering, reactive magnetron sputtering, pulsed reactive magnetron sputtering, HiPIMS, and finally R-HiPIMS. The tutorial is concluded by considering variations of R-HiPIMS known as modulated pulsed power magnetron sputtering and deep-oscillation magnetron sputtering and combinations of R-HiPIMS with superimposed dc magnetron sputtering.« less

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

DOE PAGES

Anders, André

2017-03-21

High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines magnetron sputtering with pulsed power concepts. Furthermore, by applying power in pulses of high amplitude and a relatively low duty cycle, large fractions of sputtered atoms and near-target gases are ionized. In contrast to conventional magnetron sputtering, HiPIMS is characterized by self-sputtering or repeated gas recycling for high and low sputter yield materials, respectively, and both for most intermediate materials. The dense plasma in front of the target has the dual function of sustaining the discharge and providing plasma-assistance to film growth, affecting the microstructure of growing films.more » Many technologically interesting thin films are compound films, which are composed of one or more metals and a reactive gas, most often oxygen or nitrogen. When reactive gas is added, non-trivial consequences arise for the system because the target may become “poisoned,” i.e., a compound layer forms on the target surface affecting the sputtering yield and the yield of secondary electron emission and thereby all other parameters. It is emphasized that the target state depends not only on the reactive gas' partial pressure (balanced via gas flow and pumping) but also on the ion flux to the target, which can be controlled by pulse parameters. This is a critical technological opportunity for reactive HiPIMS (R-HiPIMS). The scope of this tutorial is focused on plasma processes and mechanisms of operation and only briefly touches upon film properties. It introduces R-HiPIMS in a systematic, step-by-step approach by covering sputtering, magnetron sputtering, reactive magnetron sputtering, pulsed reactive magnetron sputtering, HiPIMS, and finally R-HiPIMS. The tutorial is concluded by considering variations of R-HiPIMS known as modulated pulsed power magnetron sputtering and deep-oscillation magnetron sputtering and combinations of R-HiPIMS with superimposed dc magnetron sputtering.« less

Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

NASA Astrophysics Data System (ADS)

Anders, André

2017-05-01

High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines magnetron sputtering with pulsed power concepts. By applying power in pulses of high amplitude and a relatively low duty cycle, large fractions of sputtered atoms and near-target gases are ionized. In contrast to conventional magnetron sputtering, HiPIMS is characterized by self-sputtering or repeated gas recycling for high and low sputter yield materials, respectively, and both for most intermediate materials. The dense plasma in front of the target has the dual function of sustaining the discharge and providing plasma-assistance to film growth, affecting the microstructure of growing films. Many technologically interesting thin films are compound films, which are composed of one or more metals and a reactive gas, most often oxygen or nitrogen. When reactive gas is added, non-trivial consequences arise for the system because the target may become "poisoned," i.e., a compound layer forms on the target surface affecting the sputtering yield and the yield of secondary electron emission and thereby all other parameters. It is emphasized that the target state depends not only on the reactive gas' partial pressure (balanced via gas flow and pumping) but also on the ion flux to the target, which can be controlled by pulse parameters. This is a critical technological opportunity for reactive HiPIMS (R-HiPIMS). The scope of this tutorial is focused on plasma processes and mechanisms of operation and only briefly touches upon film properties. It introduces R-HiPIMS in a systematic, step-by-step approach by covering sputtering, magnetron sputtering, reactive magnetron sputtering, pulsed reactive magnetron sputtering, HiPIMS, and finally R-HiPIMS. The tutorial is concluded by considering variations of R-HiPIMS known as modulated pulsed power magnetron sputtering and deep-oscillation magnetron sputtering and combinations of R-HiPIMS with superimposed dc magnetron sputtering.

The structure and properties of pulsed dc magnetron sputtered nanocrystalline TiN films for electrodes of alkali metal thermal-to-electric conversion systems.

PubMed

Chun, Sung-Yong

2013-03-01

Titanium nitride films used as an important electrode material for the design of alkali metal thermal-to-electric conversion (AMTEC) system have been prepared using dc (direct current) and asymmetric-bipolar pulsed dc magnetron sputtering. The pulse frequency and the duty cycle were varied from 5 to 50 kHz and 50 to 95%, respectively. The deposition rate, grain size and resistivity of pulsed dc sputtered films were decreased when the pulse frequency increased, while the nano hardness of titanium nitride films increased. We present in detail coatings (e.g., deposition rate, grain size, prefer-orientation, resistivity and hardness). Our studies show that titanium nitride coatings with superior properties can be prepared using asymmetric-bipolar pulsed dc sputtering.

Sputtered Pd as Hydrogen Storage for a Chip-Integrated Microenergy System

PubMed Central

Slavcheva, E.; Ganske, G.; Schnakenberg, U.

2014-01-01

The work presents a research on preparation and physical and electrochemical characterisation of dc magnetron sputtered Pd films envisaged for application as hydrogen storage in a chip-integrated hydrogen microenergy system. The influence of the changes in the sputtering pressure on the surface structure, morphology, and roughness was analysed by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AMF). The electrochemical activity towards hydrogen adsorption/desorption and formation of PdH were investigated in 0.5 M H2SO4 using the methods of cyclic voltammetry and galvanostatic polarisation. The changes in the electrical properties of the films as a function of the sputtering pressure and the level of hydrogenation were evaluated before and immediately after the electrochemical charging tests, using a four-probe technique. The research resulted in establishment of optimal sputter regime, ensuring fully reproducible Pd layers with highly developed surface, moderate porosity, and mechanical stability. Selected samples were integrated as hydrogen storage in a newly developed unitized microenergy system and tested in charging (water electrolysis) and discharging (fuel cell) operative mode at ambient conditions demonstrating a stable recycling performance. PMID:24516356

A 300 GHz collective scattering diagnostic for low temperature plasmas.

PubMed

Hardin, Robert A; Scime, Earl E; Heard, John

2008-10-01

A compact and portable 300 GHz collective scattering diagnostic employing a homodyne detection scheme has been constructed and installed on the hot helicon experiment (HELIX). Verification of the homodyne detection scheme was accomplished with a rotating grooved aluminum wheel to Doppler shift the interaction beam. The HELIX chamber geometry and collection optics allow measurement of scattering angles ranging from 60 degrees to 90 degrees. Artificially driven ion-acoustic waves are also being investigated as a proof-of-principle test for the diagnostic system.

Development of a compact permanent magnet helicon plasma source for ion beam bioengineering.

PubMed

Kerdtongmee, P; Srinoum, D; Nisoa, M

2011-10-01

A compact helicon plasma source was developed as a millimeter-sized ion source for ion beam bioengineering. By employing a stacked arrangement of annular-shaped permanent magnets, a uniform axial magnetic flux density up to 2.8 kG was obtained. A cost effective 118 MHz RF generator was built for adjusting forward output power from 0 to 40 W. The load impedance and matching network were then analyzed. A single loop antenna and circuit matching elements were placed on a compact printed circuit board for 50 Ω impedance matching. A plasma density up to 1.1 × 10(12) cm(-3) in the 10 mm diameter tube under the magnetic flux density was achieved with 35 W applied RF power.

Preliminary Study of a Hybrid Helicon-ECR Plasma Source

NASA Astrophysics Data System (ADS)

M. Hala, A.; Oksuz, L.; Ximing, Zhu

2016-08-01

A new type of hybrid discharge is experimentally investigated in this work. A helicon source and an electron cyclotron resonance (ECR) source were combined to produce plasma. As a preliminary study of this type of plasma, the optical emission spectroscopy (OES) method was used to obtain values of electron temperature and density under a series of typical conditions. Generally, it was observed that the electron temperature decreases and the electron density increases as the pressure increased. When increasing the applied power at a certain pressure, the average electron density at certain positions in the discharge does not increase significantly possibly due to the high degree of neutral depletion. Electron temperature increased with power in the hybrid mode. Possible mechanisms of these preliminary observations are discussed.

Ion ejection from a permanent-magnet mini-helicon thruster

NASA Astrophysics Data System (ADS)

Chen, Francis F.

2014-09-01

A small helicon source, 5 cm in diameter and 5 cm long, using a permanent magnet (PM) to create the DC magnetic field B, is investigated for its possible use as an ion spacecraft thruster. Such ambipolar thrusters do not require a separate electron source for neutralization. The discharge is placed in the far-field of the annular PM, where B is fairly uniform. The plasma is ejected into a large chamber, where the ion energy distribution is measured with a retarding-field energy analyzer. The resulting specific impulse is lower than that of Hall thrusters but can easily be increased to relevant values by applying to the endplate of the discharge a small voltage relative to spacecraft ground.

Ion ejection from a permanent-magnet mini-helicon thruster

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Francis F.

2014-09-15

A small helicon source, 5 cm in diameter and 5 cm long, using a permanent magnet (PM) to create the DC magnetic field B, is investigated for its possible use as an ion spacecraft thruster. Such ambipolar thrusters do not require a separate electron source for neutralization. The discharge is placed in the far-field of the annular PM, where B is fairly uniform. The plasma is ejected into a large chamber, where the ion energy distribution is measured with a retarding-field energy analyzer. The resulting specific impulse is lower than that of Hall thrusters but can easily be increased to relevant valuesmore » by applying to the endplate of the discharge a small voltage relative to spacecraft ground.« less

Development of a compact permanent magnet helicon plasma source for ion beam bioengineering

NASA Astrophysics Data System (ADS)

Kerdtongmee, P.; Srinoum, D.; Nisoa, M.

2011-10-01

A compact helicon plasma source was developed as a millimeter-sized ion source for ion beam bioengineering. By employing a stacked arrangement of annular-shaped permanent magnets, a uniform axial magnetic flux density up to 2.8 kG was obtained. A cost effective 118 MHz RF generator was built for adjusting forward output power from 0 to 40 W. The load impedance and matching network were then analyzed. A single loop antenna and circuit matching elements were placed on a compact printed circuit board for 50 Ω impedance matching. A plasma density up to 1.1 × 1012 cm-3 in the 10 mm diameter tube under the magnetic flux density was achieved with 35 W applied RF power.

Reduction of plasma density in the Helicity Injected Torus with Steady Inductance experiment by using a helicon pre-ionization source.

PubMed

Hossack, Aaron C; Firman, Taylor; Jarboe, Thomas R; Prager, James R; Victor, Brian S; Wrobel, Jonathan S; Ziemba, Timothy

2013-10-01

A helicon based pre-ionization source has been developed and installed on the Helicity Injected Torus with Steady Inductance (HIT-SI) spheromak. The source initiates plasma breakdown by injecting impurity-free, unmagnetized plasma into the HIT-SI confinement volume. Typical helium spheromaks have electron density reduced from (2-3) × 10(19) m(-3) to 1 × 10(19) m(-3). Deuterium spheromak formation is possible with density as low as 2 × 10(18) m(-3). The source also enables HIT-SI to be operated with only one helicity injector at injector frequencies above 14.5 kHz. A theory explaining the physical mechanism driving the reduction of breakdown density is presented.

Ion beams in multi-species plasmas

NASA Astrophysics Data System (ADS)

Aguirre, E. M.; Scime, E. E.; Good, T. N.

2018-04-01

Argon and xenon ion velocity distribution functions are measured in Ar-He, Ar-Xe, and Xe-He expanding helicon plasmas to determine if ion beam velocity is enhanced by the presence of lighter ions. Contrary to observations in mixed gas sheath experiments, we find that adding a lighter ion does not increase the ion beam speed. The predominant effect is a reduction of ion beam velocity consistent with increased drag arising from increased gas pressure under all conditions: constant total gas pressure, equal plasma densities of different ions, and very different plasma densities of different ions. These results suggest that the physics responsible for the acceleration of multiple ion species in simple sheaths is not responsible for the ion acceleration observed in expanding helicon plasmas.

Theoretical investigations on plasma processes in the Kaufman thruster. [electron and ion velocity distribution

NASA Technical Reports Server (NTRS)

Wilhelm, H. E.

1974-01-01

An analysis of the sputtering of metal surfaces and grids by ions of medium energies is given and it is shown that an exact, nonlinear, hyperbolic wave equation for the temperature field describes the transient transport of heat in metals. Quantum statistical and perturbation theoretical analysis of surface sputtering by low energy ions are used to develop the same expression for the sputtering rate. A transport model is formulated for the deposition of sputtered atoms on system components. Theoretical efforts in determining the potential distribution and the particle velocity distributions in low pressure discharges are briefly discussed.

Advanced capabilities and applications of a sputter-RBS system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Brijs, B.; Deleu, J.; Beyer, G.

1999-06-10

In previous experiments, sputter-RBS{sup 1} has proven to be an ideal tool to study the interaction of low energy ions. This contribution employs the same methodology to identify surface contamination induced during sputtering and to the determine absolute sputter yields. In the first experiment ERDA analysis was used to study the evolution of Hydrogen contamination during sputter-RBS experiments. Since the determination of Hydrogen concentration in very thin near surface layers is frequently limited by the presence of a strong surface peak of Hydrogen originating from adsorbed contamination of the residual vacuum, removal of this contamination would increase the sensitivity formore » Hydrogen detection in the near sub surface drastically. Therefore low energy (12 keV) Argon sputtering was used to remove the Hydrogen surface peak. However enhanced Hydrogen adsorption was observed related to the Ar dose. This experiment shows that severe vacuum conditions and the use of high current densities/sputter yields are a prerequisite for an efficient detection of Hydrogen in the near surface layers. In the second experiment, an attempt was made to determine the sputter yield of Cu during low energy (12 keV) Oxygen bombardment. In order to determine the accumulated dose of the low energy ion beam, a separate Faraday cup in combination with a remote controlled current have been added to the existing sputter-RBS set-up. Alternating sputtering and RBS analysis seem to be an adequate tool for the determination of the absolute sputter yield of Cu and this as well in the as under steady state conditions.« less

Preparation of multilayered nanocrystalline thin films with composition-modulated interfaces

NASA Astrophysics Data System (ADS)

Biro, D.; Barna, P. B.; Székely, L.; Geszti, O.; Hattori, T.; Devenyi, A.

2008-06-01

The properties of multilayer thin film structures depend on the morphology and structure of interfaces. A broad interface, in which the composition is varying, can enhance, e.g., the hardness of multilayer thin films. In the present experiments multilayers of TiAlN and CrN as well as TiAlN, CrN and MoS 2 were studied by using unbalanced magnetron sputter sources. The sputter sources were arranged side by side on an arc. This arrangement permits development of a transition zone between the layers, where the composition changes continuously. The multilayer system was deposited by one-fold oscillating movement of substrates in front of sputter sources. Thicknesses of layers could be changed both by oscillation frequency and by the power applied to sputter sources. Ti/Al: 50/50 at%, pure chromium and MoS 2 targets were used in the sputter sources. The depositions were performed in an Ar-N 2 mixture at 0.22 Pa working pressure. The sputtering power of the TiAl source was feed-back adjusted in fuzzy-logic mode in order to avoid fluctuation of the TiAl target sputter rate due to poisoning of the target surface. Structure characterization of films deposited on <1 0 0> Si wafers covered by thermally grown SiO 2 was performed by cross-sectional transmission electron microscopy. At first a 100 nm thick Cr base layer was deposited on the substrate to improve adhesion, which was followed by a CrN transition layer. The CrN transition layer was followed by a 100 nm thick TiAlN/CrN multilayer system. The TiAlN/CrN/MoS 2 multilayer system was deposited on the surface of this underlayer system. The underlayer systems Cr, CrN and TiAlN/CrN were crystalline with columnar structure according to the morphology of zone T of the structure zone models. The column boundaries contained segregated phases showing up in the under-focused TEM images. The surface of the underlayer system was wavy due to dome-shaped columns. The nanometer-scaled TiAlN/CrN/MoS 2 multilayer system followed this waviness. Crystallinity of the TiAlN and CrN layers in the multilayer system decreases with increasing thickness of the MoS 2 layer.

Sputtering by the Solar Wind: Effects of Variable Composition

NASA Technical Reports Server (NTRS)

Killen, R. M.; Arrell, W. M.; Sarantos, M.; Delory, G. T.

2011-01-01

It has long been recognized that solar wind bombardment onto exposed surfaces in the solar system will produce an energetic component to the exospheres about those bodies. Laboratory experiments have shown that there is no increase in the sputtering yield caused by highly charged heavy ions for metallic and for semiconducting surfaces, but the sputter yield can be noticeably increased in the case of a good insulating surface. Recently measurements of the solar wind composition have become available. It is now known that the solar wind composition is highly dependent on the origin of the particular plasma. Using the measured composition of the slow wind, fast wind, solar energetic particle (SEP) population, and coronal mass ejection (CME), broken down into its various components, we have estimated the total sputter yield for each type of solar wind. Whereas many previous calculations of sputtering were limited to the effects of proton bombardment. we show that the heavy ion component. especially the He++ component. can greatly enhance the total sputter yield during times when the heavy ion population is enhanced. We will discuss sputtering of both neutrals and ions.

Acceleration of Dense Flowing Plasmas using ICRF Power in the VASIMR Experiment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Squire, Jared P.

2005-09-26

ICRF power in the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) concept energizes ions (> 100 eV) in a diverging magnetic field to accelerate a dense ({approx} 1019 m-3) flowing plasma to velocities useful for space propulsion ({approx}100 km/s). Theory predicts that an ICRF slow wave launched from the high field side of the resonance will propagate in the magnetic beach to absorb nearly all of the power at the resonance, thus efficiently converting the RF power to ion kinetic energy. The plasma flows through the resonance only once, so the ions are accelerated in a single pass. This process hasmore » proven efficient ({approx} 70%) with an ICRF power level of 1.5 kW at about 3.6 MHz in the VASIMR experiment, VX-30, using deuterium plasma created by a helicon operating in flowing mode. We have measured ICRF plasma loading up to 2 ohms, consistent with computational predictions made using Oak Ridge National Laboratory's EMIR code. Recent helicon power upgrades (20 kW at 13.56 MHz) have enabled a 5 cm diameter target plasma for ICRF with an ion flux of over 3x10 20 s-1 and a high degree of ionization. This paper summarizes our ICRF results and presents the latest helicon developments in VX-30.« less

A comparison of ion beam measurements by retarding field energy analyzer and laser induced fluorescence in helicon plasma devices

NASA Astrophysics Data System (ADS)

Gulbrandsen, N.; Fredriksen, Å.; Carr, J.; Scime, E.

2015-03-01

Both Laser-Induced Fluorescence (LIF) and Retarding Field Energy Analyzers (RFEA) have been applied to the investigation of beams formed in inductively coupled helicon plasmas. While the LIF technique provides a direct measurement of the velocity distribution in the plasma, the RFEA measures ion flux as a function of a retarding potential. In this paper, we present a method to compare the two techniques, by converting the LIF velocity distribution to an equivalent of a RFEA measurement. We applied this method to compare new LIF and RFEA measurements in two different experiments; the Hot Helicon Experiment (HELIX) - Large Experiment on Instabilities and Anisotropies (LEIA) at West Virginia University and Njord at University of Tromsø. We find good agreement between beam energies of the two methods. In agreement with earlier observations, the RFEA is found to measure ion beams with densities too low for the LIF to resolve. In addition, we present measurements of the axial development of the ion beam in both experiments. Beam densities drop exponentially with distance from the source, both in LIF and RFEA measurements. The effective quenching cross section from LIF in LEIA is found to be σb,*=4 ×10-19 m2 , and the effective beam collisional cross sections by RFEA in Njord to be σb=1.7 ×10-18 m2 .

Experiment-Model Comparisons of Turbulence, Transport, and Flows in a Magnetized Linear Plasma Using a Global Two-Fluid Braginskii Solver

NASA Astrophysics Data System (ADS)

Gilmore, M.; Fisher, D. M.; Kelly, R. F.; Hatch, M. W.; Rogers, B. N.

2017-10-01

Ongoing experiments and numerical modeling of the dynamics of electrostatic turbulence and transport in the presence of flow shear are being conducted in helicon plasmas in the linear HelCat (Helicon-Cathode) device. Modeling is being done using GBS, a 3D, global two-fluid Braginskii code that solves self-consistently for plasma equilibrium as well as fluctuations. Past experimental measurements of flows have been difficult to reconcile with simple expectations, such as azimuthal flows being dominated by Er x Bz rotation. Therefore, recent measurements have focused on understanding plasma flows, and the role of neutral dynamics. In the model, a set of two-fluid drift-reduced Braginskii equations are evolved using the Global Braginskii Solver Code (GBS). For low-field helicon-sourced Ar plasmas a non-negligible cross-field thermal collisional term must be added to shift the electric potential in the ion momentum and vorticity equations as the ions are unmagnetized. Significant radially and axially dependent neutral profiles are also included in the simulations to try and match those observed in HelCat. Ongoing simulations show a mode dependence on the axial magnetic field along with strong axial variations that suggest drift waves may be important in the low-field case. Supported by U.S. National Science Foundation Award 1500423.

Investigating flow patterns and related dynamics in multi-instability turbulent plasmas using a three-point cross-phase time delay estimation velocimetry scheme

NASA Astrophysics Data System (ADS)

Brandt, C.; Thakur, S. C.; Tynan, G. R.

2016-04-01

Complexities of flow patterns in the azimuthal cross-section of a cylindrical magnetized helicon plasma and the corresponding plasma dynamics are investigated by means of a novel scheme for time delay estimation velocimetry. The advantage of this introduced method is the capability of calculating the time-averaged 2D velocity fields of propagating wave-like structures and patterns in complex spatiotemporal data. It is able to distinguish and visualize the details of simultaneously present superimposed entangled dynamics and it can be applied to fluid-like systems exhibiting frequently repeating patterns (e.g., waves in plasmas, waves in fluids, dynamics in planetary atmospheres, etc.). The velocity calculations are based on time delay estimation obtained from cross-phase analysis of time series. Each velocity vector is unambiguously calculated from three time series measured at three different non-collinear spatial points. This method, when applied to fast imaging, has been crucial to understand the rich plasma dynamics in the azimuthal cross-section of a cylindrical linear magnetized helicon plasma. The capabilities and the limitations of this velocimetry method are discussed and demonstrated for two completely different plasma regimes, i.e., for quasi-coherent wave dynamics and for complex broadband wave dynamics involving simultaneously present multiple instabilities.

IShTAR ICRF antenna field characterization in vacuum and plasma by using probe diagnostic

NASA Astrophysics Data System (ADS)

Usoltceva, Mariia; Ochoukov, Roman; D'Inca, Rodolphe; Jacquot, Jonathan; Crombé, Kristel; Kostic, Ana; Heuraux, Stéphane; Faudot, Eric; Noterdaeme, Jean-Marie

2017-10-01

RF sheath physics is one of the key topics relevant for improvements of ICRF heating systems, which are present on nearly all modern magnetic fusion machines. This paper introduces developement and validation of a new approach to understanding general RF sheath physics. The presumed reason of enhanced plasma-antenna interactions, parallel electric field, is not measured directly, but proposed to be obtained from simulations in COMSOL Multiphysics® Modeling Software. Measurements of RF magnetic field components with B-dot probes are done on a linear device IShTAR (Ion cyclotron Sheath Test ARrangement) and then compared to simulations. Good resulting accordance is suggested to be the criterion for trustworthiness of parallel electric field estimation as a component of electromagnetic field in modeling. A comparison between simulation and experiment for one magnetic field component in vacuum has demonstrated a close match. An additional complication to this ICRF antenna field characterization study is imposed by the helicon antenna which is used as a plasma ignition tool in the test arrangement. The plasma case, in contrast to the vacuum case, must be approached carefully, since the overlapping of ICRF antenna and helicon antenna fields occurs. Distinguishing of the two fields is done by an analysis of correlation between measurements with both antennas together and with each one separately.

Investigating flow patterns and related dynamics in multi-instability turbulent plasmas using a three-point cross-phase time delay estimation velocimetry scheme

DOE Office of Scientific and Technical Information (OSTI.GOV)

Brandt, C.; Max-Planck-Institute for Plasma Physics, Wendelsteinstr. 1, D-17491 Greifswald; Thakur, S. C.

2016-04-15

Complexities of flow patterns in the azimuthal cross-section of a cylindrical magnetized helicon plasma and the corresponding plasma dynamics are investigated by means of a novel scheme for time delay estimation velocimetry. The advantage of this introduced method is the capability of calculating the time-averaged 2D velocity fields of propagating wave-like structures and patterns in complex spatiotemporal data. It is able to distinguish and visualize the details of simultaneously present superimposed entangled dynamics and it can be applied to fluid-like systems exhibiting frequently repeating patterns (e.g., waves in plasmas, waves in fluids, dynamics in planetary atmospheres, etc.). The velocity calculationsmore » are based on time delay estimation obtained from cross-phase analysis of time series. Each velocity vector is unambiguously calculated from three time series measured at three different non-collinear spatial points. This method, when applied to fast imaging, has been crucial to understand the rich plasma dynamics in the azimuthal cross-section of a cylindrical linear magnetized helicon plasma. The capabilities and the limitations of this velocimetry method are discussed and demonstrated for two completely different plasma regimes, i.e., for quasi-coherent wave dynamics and for complex broadband wave dynamics involving simultaneously present multiple instabilities.« less

Observing Planets and Small Bodies in Sputtered High Energy Atom (SHEA) Fluxes

NASA Technical Reports Server (NTRS)

Milillo, A.; Orsini, S.; Hsieh, K. C.; Baragiola, R.; Fama, M.; Johnson, R.; Mura, A.; Plainaki, Ch.; Sarantos, M.; Cassidy, T. A.;

Activation product transport in fusion reactors. [RAPTOR

DOE Office of Scientific and Technical Information (OSTI.GOV)

Klein, A.C.

1983-01-01

Activated corrosion and neutron sputtering products will enter the coolant and/or tritium breeding material of fusion reactor power plants and experiments and cause personnel access problems. Radiation levels around plant components due to these products will cause difficulties with maintenance and repair operations throughout the plant. Similar problems are experienced around fission reactor systems. The determination of the transport of radioactive corrosion and neutron sputtering products through the system is achieved using the computer code RAPTOR. This code calculates the mass transfer of a number of activation products based on the corrosion and sputtering rates through the system, the depositionmore » and release characteristics of various plant components, the neturon flux spectrum, as well as other plant parameters. RAPTOR assembles a system of first order linear differential equations into a matrix equation based upon the reactor system parameters. Included in the transfer matrix are the deposition and erosion coefficients, and the decay and activation data for the various plant nodes and radioactive isotopes. A source vector supplies the corrosion and neutron sputtering source rates. This matrix equation is then solved using a matrix operator technique to give the specific activity distribution of each radioactive species throughout the plant. Once the amount of mass transfer is determined, the photon transport due to the radioactive corrosion and sputtering product sources can be evaluated, and dose rates around the plant components of interest as a function of time can be determined. This method has been used to estimate the radiation hazards around a number of fusion reactor system designs.« less

Continuous Sputter Deposition Coating of Long Monofilaments

DTIC Science & Technology

2014-04-01

sectional view of sample 1. Using SEM, the copper coated monofilament was observed to be smooth with little to no indications of flaking or cracked...monofilament. The magnetron sputter deposition (MSD) process was used to apply copper coatings on the order of 10–100 nanometers thick onto both nylon...of monofilaments. Though only copper coatings are discussed in this report, the system could also be used to apply a variety of sputtered metal or

Surface acoustic wave/silicon monolithic sensor/processor

NASA Technical Reports Server (NTRS)

Kowel, S. T.; Kornreich, P. G.; Nouhi, A.; Kilmer, R.; Fathimulla, M. A.; Mehter, E.

1983-01-01

A new technique for sputter deposition of piezoelectric zinc oxide (ZnO) is described. An argon-ion milling system was converted to sputter zinc oxide films in an oxygen atmosphere using a pure zinc oxide target. Piezoelectric films were grown on silicon dioxide and silicon dioxide overlayed with gold. The sputtered films were evaluated using surface acoustic wave measurements, X-ray diffraction, scanning electron microscopy, Auger electron spectroscopy, and resistivity measurements. The effect of the sputtering conditions on the film quality and the result of post-deposition annealing are discussed. The application of these films to the generation of surface acoustic waves is also discussed.

Helicons, magnetoplasma edge, and faraday rotation in solid state plasmas at microwave frequencies.

PubMed

Furdyna, J K

1967-04-01

The effect of magnetic field on propagation of electromagnetic waves through free carrier plasmas in semiconductors is discussed. The Faraday configuration and the parameter ranges omega(c),omega(p) > omega and omega(c) > tau(-1) are specifically considered. Dispersion of helicon waves, propagation near the magnetoplasma edge (omega(p)(2) = omegaomega(c)), and the Faraday rotation are developed in terms of the one-electron Drude theory. Microwave transmission measurements at 35 Gc/s on n-type InSb are presented. Experiments near the magnetoplasma edge yield the value of the static dielectric constant of the InSb lattice K(l) = 19.3 +/- 0.8. Faraday rotation, observed beyond the edge, is found to be extremely large. Some practical possibilities for this effect are considered.

Initial experimental test of a helicon plasma based mass filter

NASA Astrophysics Data System (ADS)

Gueroult, R.; Evans, E. S.; Zweben, S. J.; Fisch, N. J.; Levinton, F.

2016-06-01

High throughput plasma mass separation requires rotation control in a high density multi-species plasmas. A preliminary mass separation device based on a helicon plasma operating in gas mixtures and featuring concentric biasable ring electrodes is introduced. Plasma profile shows strong response to electrode biasing. In light of floating potential measurements, the density response is interpreted as the consequence of a reshaping of the radial electric field in the plasma. This field can be made confining or de-confining depending on the imposed potential at the electrodes, in a way which is consistent with single particle orbit radial stability. Concurrent spatially resolved spectroscopic measurements suggest ion separation, with heavy to light ion emission line ratio increasing with radius when a specific potential gradient is applied to the electrodes.

Laser ablation with applied magnetic field for electric propulsion

NASA Astrophysics Data System (ADS)

Batishcheva, Alla; Batishchev, Oleg; Cambier, Jean-Luc

2012-10-01

Using ultrafast lasers with tera-watt-level power allows efficient ablation and ionization of solid-density materials [1], creating dense and hot (˜100eV) plasma. We propose ablating small droplets in the magnetic nozzle configurations similar to mini-helicon plasma source [2]. Such approach may improve the momentum coupling compared to ablation of solid surfaces and facilitate plasma detachment. Results of 2D modeling of solid wire ablation in the applied magnetic field are presented and discussed. [4pt] [1] O. Batishchev et al, Ultrafast Laser Ablation for Space Propulsion, AIAA technical paper 2008-5294, -16p, 44th JPC, Hartford, 2008.[0pt] [2] O. Batishchev and J.L. Cambier, Experimental Study of the Mini-Helicon Thruster, Air Force Research Laboratory Report, AFRL-RZ-ED-TR-2009-0020, 2009.

Recent Progress on the VASIMR

NASA Technical Reports Server (NTRS)

ChangDiaz, Franklin R.; Squire, J. P.; Ilin, A. V.; Jacobson, V. T.; Glover, T. W.; Baity, F. W.; Carter, M. D.; Goulding, R. H.; Breizman, B. N.

1999-01-01

Experimental and theoretical studies on the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) have continued through a NASA led collaborative program involving several research groups. In the experimental area, performance characterization of the VASIMR helicon plasma source has been obtained over a portion of the parameter space, with helium and hydrogen propellant. Density (10(exp 18) - 10(exp 19)/ cubic meter) and temperature (5 eV) were measured at moderate degree of ionization in two separate experimental devices. Helicon design improvement and optimization will be discussed. Experiments with the ion cyclotron resonance heating (ICRH) subsection have begun and preliminary results will be discussed. Theoretical picture and integrated numerical simulation continue to be refined to account for the main physics elements of the VASIMR, including RF absorption and particle acceleration with subsequent detachment in the magnetic nozzle.

Large Area Sputter Coating on Glass

NASA Astrophysics Data System (ADS)

Katayama, Yoshihito

Large glass has been used for commercial buildings, housings and vehicles for many years. Glass size for flat displays is getting larger and larger. The glass for the 8th generation is more than 5 m2 in area. Demand of the large glass is increasing not only in these markets but also in a solar cell market growing drastically. Therefore, large area coating is demanded to plus something else on glass more than ever. Sputtering and pyrolysis are the major coating methods on large glass today. Sputtering process is particularly popular because it can deposit a wide variety of materials in good coating uniformity on the glass. This paper describes typical industrial sputtering system and recent progress in sputtering technology. It also shows typical coated glass products in architectural, automotive and display fields and comments on their functions, film stacks and so on.

Method and apparatus for coating thin foil with a boron coating

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lacy, Jeffrey L.

An apparatus and a process is disclosed for applying a boron coating to a thin foil. Preferably, the process is a continuous, in-line process for applying a coating to a thin foil comprising wrapping the foil around a rotating and translating mandrel, cleaning the foil with glow discharge in an etching chamber as the mandrel with the foil moves through the chamber, sputtering the foil with boron carbide in a sputtering chamber as the mandrel moves through the sputtering chamber, and unwinding the foil off the mandrel after it has been coated. The apparatus for applying a coating to amore » thin foil comprises an elongated mandrel. Foil preferably passes from a reel to the mandrel by passing through a seal near the initial portion of an etching chamber. The mandrel has a translation drive system for moving the mandrel forward and a rotational drive system for rotating mandrel as it moves forward. The etching chamber utilizes glow discharge on a surface of the foil as the mandrel moves through said etching chamber. A sputtering chamber, downstream of the etching chamber, applies a thin layer comprising boron onto the surface of the foil as said mandrel moves through said sputtering chamber. Preferably, the coated foil passes from the mandrel to a second reel by passing through a seal near the terminal portion of the sputtering chamber.« less

Presheath and Double Layer Structures in an Argon Helicon Plasma Source

NASA Astrophysics Data System (ADS)

Siddiqui, M. Umair

Ion velocities and temperatures, plasma density, potential, and electron temperatures are measured in a 13.56 MHz helicon produced argon plasma upstream from a grounded plate inside a 10 cm ID cylindrical Pyrex vacuum chamber. The plate is held at psi = 0° → 60° relative to the background axial magnetic field in the system. For the psi = 0° experiment, two distinct helicon discharge equilibria are observed at 500 W rf power, 900 G magnetic field, and a neutral pressure of 3 → 4 mTorr. Both modes exhibit a localized region of hot electrons (Th ≈ 10 eV, Tc ≈ 3.5 eV). For the first mode the hot electrons are confined by a localized potential structure and the density decreases monotonically towards the grounded plate. For the second mode the hot electrons cool off gradually in space due to heat conduction generating a downstream density peak and no major potential structures are observed. It is found that the type of discharge mode is determined by the location of the grounded plate, the length of the presheath, and the rf electron heating mechanism. For the psi = 16° → 60° plate positions, ion flow to the boundary where a 1 kG magnetic field is obliquely incident is measured at 1, 3, and 6.5 mTorr neutral pressure and 450 → 750 W rf power. The results are compared to the magnetic presheath models put forth by Chodura [Phys. Fluids 25, 1628 (1982)], Riemann [Phys. Plasmas 1, 552 (1994)], and Ahedo [Phys. Plasmas 4, 4419 (1997)]. The 1 mTorr dataset is used to benchmark a one-dimensional fluid model for the ion flow in the presheath. Definitions of the "magnetic presheath" are discussed. The fluid model in conjuction with the data show that the ion velocities in the E x B direction can be 10% → 40% percent of the sound speed for the angles investigated. Ion flow to fusion experiment boundaries and Hall thruster walls is discussed.

Developing the science and technology for the Material Plasma Exposure eXperiment

DOE PAGES

Rapp, J.; Biewer, T. M.; Bigelow, T. S.; ...

2017-07-27

Linear plasma generators are cost effective facilities to simulate divertor plasma conditions of present and future fusion reactors. They are used to address important R&D gaps in the science of plasma material interactions and towards viable plasma facing components for fusion reactors. Next generation plasma generators have to be able to access the plasma conditions expected on the divertor targets in ITER and future devices. The steady-state linear plasma device MPEX will address this regime with electron temperatures of 1–10 eV and electron densities ofmore » $$10^{21}{\\text{}}\\!-\\!10^{20}$$ $${\\rm m}^{-3}$$. The resulting heat fluxes are about 10 MW $${\\rm m}^{-2}$$ . MPEX is designed to deliver those plasma conditions with a novel Radio Frequency plasma source able to produce high density plasmas and heat electron and ions separately with electron Bernstein wave (EBW) heating and ion cyclotron resonance heating with a total installed power of 800 kW. The linear device Proto-MPEX, forerunner of MPEX consisting of 12 water-cooled copper coils, has been operational since May 2014. Its helicon antenna (100 kW, 13.56 MHz) and EC heating systems (200 kW, 28 GHz) have been commissioned and 14 MW $${\\rm m}^{-2}$$ was delivered on target. Furthermore, electron temperatures of about 20 eV have been achieved in combined helicon and ECH heating schemes at low electron densities. Overdense heating with EBW was achieved at low heating powers. The operational space of the density production by the helicon antenna was pushed up to $$1.1 \\times 10^{20}$$ $${\\rm m}^{-3}$$ at high magnetic fields of 1.0 T at the target. Finally, the experimental results from Proto-MPEX will be used for code validation to enable predictions of the source and heating performance for MPEX. MPEX, in its last phase, will be capable to expose neutron-irradiated samples. In this concept, targets will be irradiated in ORNL's High Flux Isotope Reactor and then subsequently exposed to fusion reactor relevant plasmas in MPEX.« less

Developing the science and technology for the Material Plasma Exposure eXperiment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Rapp, J.; Biewer, T. M.; Bigelow, T. S.

Linear plasma generators are cost effective facilities to simulate divertor plasma conditions of present and future fusion reactors. They are used to address important R&D gaps in the science of plasma material interactions and towards viable plasma facing components for fusion reactors. Next generation plasma generators have to be able to access the plasma conditions expected on the divertor targets in ITER and future devices. The steady-state linear plasma device MPEX will address this regime with electron temperatures of 1–10 eV and electron densities ofmore » $$10^{21}{\\text{}}\\!-\\!10^{20}$$ $${\\rm m}^{-3}$$. The resulting heat fluxes are about 10 MW $${\\rm m}^{-2}$$ . MPEX is designed to deliver those plasma conditions with a novel Radio Frequency plasma source able to produce high density plasmas and heat electron and ions separately with electron Bernstein wave (EBW) heating and ion cyclotron resonance heating with a total installed power of 800 kW. The linear device Proto-MPEX, forerunner of MPEX consisting of 12 water-cooled copper coils, has been operational since May 2014. Its helicon antenna (100 kW, 13.56 MHz) and EC heating systems (200 kW, 28 GHz) have been commissioned and 14 MW $${\\rm m}^{-2}$$ was delivered on target. Furthermore, electron temperatures of about 20 eV have been achieved in combined helicon and ECH heating schemes at low electron densities. Overdense heating with EBW was achieved at low heating powers. The operational space of the density production by the helicon antenna was pushed up to $$1.1 \\times 10^{20}$$ $${\\rm m}^{-3}$$ at high magnetic fields of 1.0 T at the target. Finally, the experimental results from Proto-MPEX will be used for code validation to enable predictions of the source and heating performance for MPEX. MPEX, in its last phase, will be capable to expose neutron-irradiated samples. In this concept, targets will be irradiated in ORNL's High Flux Isotope Reactor and then subsequently exposed to fusion reactor relevant plasmas in MPEX.« less

Helicon plasma thruster discharge model

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lafleur, T., E-mail: trevor.lafleur@lpp.polytechnique.fr

2014-04-15

By considering particle, momentum, and energy balance equations, we develop a semi-empirical quasi one-dimensional analytical discharge model of radio-frequency and helicon plasma thrusters. The model, which includes both the upstream plasma source region as well as the downstream diverging magnetic nozzle region, is compared with experimental measurements and confirms current performance levels. Analysis of the discharge model identifies plasma power losses on the radial and back wall of the thruster as the major performance reduction factors. These losses serve as sinks for the input power which do not contribute to the thrust, and which reduce the maximum plasma density andmore » hence propellant utilization. With significant radial plasma losses eliminated, the discharge model (with argon) predicts specific impulses in excess of 3000 s, propellant utilizations above 90%, and thruster efficiencies of about 30%.« less

Reduction of plasma density in the Helicity Injected Torus with Steady Inductance experiment by using a helicon pre-ionization source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hossack, Aaron C.; Jarboe, Thomas R.; Victor, Brian S.

2013-10-15

A helicon based pre-ionization source has been developed and installed on the Helicity Injected Torus with Steady Inductance (HIT-SI) spheromak. The source initiates plasma breakdown by injecting impurity-free, unmagnetized plasma into the HIT-SI confinement volume. Typical helium spheromaks have electron density reduced from (2–3) × 10{sup 19} m{sup −3} to 1 × 10{sup 19} m{sup −3}. Deuterium spheromak formation is possible with density as low as 2 × 10{sup 18} m{sup −3}. The source also enables HIT-SI to be operated with only one helicity injector at injector frequencies above 14.5 kHz. A theory explaining the physical mechanism driving the reductionmore » of breakdown density is presented.« less

Effect of gas mixing on physical properties of warm collisional helicon plasmas

NASA Astrophysics Data System (ADS)

Kabir, M.; Niknam, A. R.

2017-10-01

The effect of inert gas mixing on the physical properties of a helicon plasma source with a Nagoya type III antenna is analytically investigated by taking into account the thermal and collisional effects. The dielectric permittivity tensor of this mixed gas plasma is obtained by using the Bhatnagar-Gross- Krook kinetic theory. Considering the dielectric tensor of mixed gas plasma and solving the electromagnetic field equations, the profiles of electromagnetic fields and plasma resistance are plotted and discussed. The results show that the plasma resistance peaks decrease with increasing Xe fraction in Ar-Xe plasma, and increase with the He fraction in Ar-He plasma. It is also shown that by increasing the xenon filling fraction, the electromagnetic field amplitudes are lowered, and by increasing the helium filling fraction, they are increased.

Helicon Plasma Source Optimization Studies for VASIMR

NASA Technical Reports Server (NTRS)

Goulding, R. H.; Baity, F. W.; Barber, G. C.; Carter, M. D.; ChangDiaz, F. R.; Pavarin, D.; Sparks, D. O.; Squire J. P.

1999-01-01

A helicon plasma source at Oak Ridge National Laboratory is being used to investigate operating scenarios relevant to the VASIMR (VAriable Specific Impulse Magnetoplasma Rocket). These include operation at high magnetic field (> = 0.4 T), high frequency (<= 30 MHz), high power (< = 3 kW), and with light ions (He+, H+). To date, He plasmas have been produced with n(sub e0) = 1.7 x 10(exp 19)/cu m (measured with an axially movable 4mm microwave interferometer), with Pin = I kW at f = 13.56 MHz and absolute value of B(sub 0) = 0.16 T. In the near future, diagnostics including a mass flow meter and a gridded energy analyzer array will be added to investigate fueling efficiency and the source power balance. The latest results, together with modeling results using the EMIR rf code, will be presented.

Initial experimental test of a helicon plasma based mass filter

DOE PAGES

Gueroult, R.; Evans, E. S.; Zweben, S. J.; ...

2016-05-12

High throughput plasma mass separation requires rotation control in a high density multi-species plasmas. A preliminary mass separation device based on a helicon plasma operating in gas mixtures and featuring concentric biasable ring electrodes is introduced. Plasma profile shows strong response to electrode biasing. In light of floating potential measurements, the density response is interpreted as the consequence of a reshaping of the radial electric field in the plasma. This field can be made confining or de-confining depending on the imposed potential at the electrodes, in a way which is consistent with single particle orbit radial stability. In conclusion, concurrentmore » spatially resolved spectroscopic measurements suggest ion separation, with heavy to light ion emission line ratio increasing with radius when a specific potential gradient is applied to the electrodes.« less

Spatial distribution of the RF power absorbed in a helicon plasma source

NASA Astrophysics Data System (ADS)

Aleksenko, O. V.; Miroshnichenko, V. I.; Mordik, S. N.

2014-08-01

The spatial distributions of the RF power absorbed by plasma electrons in an ion source operating in the helicon mode (ω ci < ω < ω ce < ω pe ) are studied numerically by using a simplified model of an RF plasma source in an external uniform magnetic field. The parameters of the source used in numerical simulations are determined by the necessity of the simultaneous excitation of two types of waves, helicons and Trivelpiece-Gould modes, for which the corresponding transparency diagrams are used. The numerical simulations are carried out for two values of the working gas (helium) pressure and two values of the discharge chamber length under the assumption that symmetric modes are excited. The parameters of the source correspond to those of the injector of the nuclear scanning microprobe operating at the Institute of Applied Physics, National Academy of Sciences of Ukraine. It is assumed that the mechanism of RF power absorption is based on the acceleration of plasma electrons in the field of a Trivelpiece-Gould mode, which is interrupted by pair collisions of plasma electrons with neutral atoms and ions of the working gas. The simulation results show that the total absorbed RF power at a fixed plasma density depends in a resonant manner on the magnetic field. The resonance is found to become smoother with increasing working gas pressure. The distributions of the absorbed RF power in the discharge chamber are presented. The achievable density of the extracted current is estimated using the Bohm criterion.

Transition from edge-localized to center-localized power deposition in helicon discharges

NASA Astrophysics Data System (ADS)

Curreli, D.

2011-11-01

In radiofrequency (RF) helicon discharges the electromagnetic power is transferred from the RF field irradiated by the antenna to the plasma medium by means of plasma-wave coupling of the electromagnetic wave with the electrons. For the common industrial frequencies of tens of MHz, and for typical pressures of few Pascals, the power deposition occurs mostly at the edge of the discharge. In these conditions, ionization and electron heating occur in a layer close to the chamber walls, where a consistent fraction of the plasma is rapidly lost by diffusion toward the surface. The remaining fraction of plasma diffuses inward toward the center of the discharge, setting up a uniform and almost flat density profile, used in applications. A one-dimensional model considering both the plasma-wave coupling of the electrons with the RF wave and the macroscopic transport of ions and neutrals along the radial dimension of a cylindrical processing chamber has been derived and used to evaluate the profiles at equilibrium. The model has been validated through Langmuir probe measurements in helicon processing chambers. The numerical model has then been used to study the power-coupling behavior of the discharge when the pressure of the neutral gas is decreased. When the Knudsen number of the neutral gas approaches unity and in conditions of slightly magnetized discharge, the power deposition shifts from being edge-localized to center-localized, thus reducing the particle fluxes toward the walls and increasing the efficiency of the coupling.

A comparison of ion beam measurements by retarding field energy analyzer and laser induced fluorescence in helicon plasma devices

DOE Office of Scientific and Technical Information (OSTI.GOV)

Gulbrandsen, N., E-mail: njal.gulbrandsen@uit.no; Fredriksen, Å.; Carr, J.

2015-03-15

Both Laser-Induced Fluorescence (LIF) and Retarding Field Energy Analyzers (RFEA) have been applied to the investigation of beams formed in inductively coupled helicon plasmas. While the LIF technique provides a direct measurement of the velocity distribution in the plasma, the RFEA measures ion flux as a function of a retarding potential. In this paper, we present a method to compare the two techniques, by converting the LIF velocity distribution to an equivalent of a RFEA measurement. We applied this method to compare new LIF and RFEA measurements in two different experiments; the Hot Helicon Experiment (HELIX) - Large Experiment onmore » Instabilities and Anisotropies (LEIA) at West Virginia University and Njord at University of Tromsø. We find good agreement between beam energies of the two methods. In agreement with earlier observations, the RFEA is found to measure ion beams with densities too low for the LIF to resolve. In addition, we present measurements of the axial development of the ion beam in both experiments. Beam densities drop exponentially with distance from the source, both in LIF and RFEA measurements. The effective quenching cross section from LIF in LEIA is found to be σ{sub b,*}=4×10{sup −19} m{sup 2}, and the effective beam collisional cross sections by RFEA in Njord to be σ{sub b}=1.7×10{sup −18} m{sup 2}.« less

Modeling of beryllium sputtering and re-deposition in fusion reactor plasma facing components

NASA Astrophysics Data System (ADS)

Zimin, A. M.; Danelyan, L. S.; Elistratov, N. G.; Gureev, V. M.; Guseva, M. I.; Kolbasov, B. N.; Kulikauskas, V. S.; Stolyarova, V. G.; Vasiliev, N. N.; Zatekin, V. V.

2004-08-01

Quantitative characteristics of Be-sputtering by hydrogen isotope ions in a magnetron sputtering system, the microstructure and composition of the sputtered and re-deposited layers were studied. The energies of H + and D + ions varied from 200 to 300 eV. The ion flux density was ˜3 × 10 21 m -2 s -1. The irradiation doses were up to 4 × 10 25 m -2. For modeling of the sputtered Be-atom re-deposition at increased deuterium pressures (up to 0.07 torr), a mode of operation with their effective return to the Be-target surface was implemented. An atomic ratio O/Be ≅ 0.8 was measured in the re-deposited layers. A ratio D/Be decreases from 0.15 at 375 K to 0.05 at 575 K and slightly grows in the presence of carbon and tungsten. The oxygen concentration in the sputtered layers does not exceed 3 at.%. The atomic ratio D/Be decreases there from 0.07 to 0.03 at target temperatures increase from 350 to 420 K.

In vitro flow measurements in ion sputtered hydrocephalus shunts

NASA Technical Reports Server (NTRS)

Cho, Y. I.; Back, L. H.

1989-01-01

This paper describes an experimental procedure for accurate measurements of the pressure-drop/flow rate relationship in hydrocephalus shunts. Using a fish-hook arrangement, small flow rates in a perforated ion-sputtered Teflon microtubule were measured in vitro in a pressured system and were correlated with pressure in the system. Results indicate that appropriate drainage rates could be obtained in the physiological range for hydrocephalus shunts.

Effect of sputtering power on structure, adhesion strength and corrosion resistance of nitrogen doped diamond-like carbon thin films.

PubMed

Khun, N W; Liu, E

2011-06-01

Nitrogen doped diamond-like carbon (DLC:N) thin films were deposited on highly conductive p-Si substrates using a DC magnetron sputtering deposition system. The DLC:N films were characterized using X-ray photoelectron spectroscopy (XPS), micro-Raman spectroscopy, atomic force microscopy (AFM), contact angle measurement and micro-scratch test. The XPS and Raman results indicated that the sputtering power significantly influenced the properties of the films in terms of bonding configuration in the films. The corrosion performance of the DLC:N films was investigated in a 0.6 M NaCl solution by means of potentiodynamic polarization testing. It was found that the corrosion performance of the films could be enhanced by higher sputtering powers.

Sputtering Yields of Si and Ni from the Ni1-xSix System Studied by Rutherford Backscattering Spectrometry

NASA Astrophysics Data System (ADS)

Kim, Su Chol; Yamaguchi, Satoru; Kataoka, Yoshihide; Iwami, Motohiro; Hiraki, Akio; Satou, Mamoru; Fujimoto, Fuminori

1982-01-01

Sputtering yields of Si and Ni from thin layer films of Ni-Si compounds (Ni1-xSix), including the pure materials (Ni and Si), caused by 5 keV Ar+ ion bombardment were investigated using backscattering spectrometry. The sputtering yield for Si from Ni1-xSix increased with increasing Si concentration. However, there is an abrupt decrease in the yield for Si concentrations above NiSi2 to pure Si. This is in clear contrast to the sputtering yield of Ni from Ni1-xSix which increased with increasing Ni concentration monotonously. These results are discussed on the basis of both the difference in the atomic density and the electronic state of the alloy.

Neutral beam dose and sputtering characteristics in an ion implantation system

NASA Technical Reports Server (NTRS)

Roberts, A. S., Jr.; Ash, R. L.; Berger, M. H.

1973-01-01

A technique and instrument design for calorimetric detection of the neutral atom content of a 60 keV argon ion beam. A beam sampling method is used to measure local heat flux to a small platinum wire at steady state; integration of power density profiles leads to a determination of equivalent neutral beam current. The fast neutral production occurs as a result of charge transfer processes in the region of the beam system between analyzing magnet and beam stop where the pressure remains less than .00001 torr. A description of the neutral beam detector is given in section along with a presentation of results. An elementary analysis of sputter material transport from target to substrate was performed; the analysis relates to semiconductor sputtering.

Development of High-Resolution UV-VIS Diagnostics for Space Plasma Simulation

NASA Astrophysics Data System (ADS)

Taylor, Andrew; Batishchev, Oleg

2012-10-01

Non-invasive far-UV-VIS plasma emission allows remote diagnostics of plasma, which is particularly important for space application. Accurate vacuum tank space plasma simulations require monochromators with high spectral resolution (better than 0.01A) to capture important details of atomic and ionic lines, such as Ly-alpha, etc. We are building a new system based on the previous work [1], and will discuss the development of a spectrometry system that combines a single-pass vacuum far-UV-NIR spectrometer and a tunable Fabry-Perot etalon. [4pt] [1] O. Batishchev and J.L. Cambier, Experimental Study of the Mini-Helicon Thruster, Air Force Research Laboratory Report, AFRL-RZ-ED-TR-2009-0020, 2009.

Secondary ion formation during electronic and nuclear sputtering of germanium

NASA Astrophysics Data System (ADS)

Breuer, L.; Ernst, P.; Herder, M.; Meinerzhagen, F.; Bender, M.; Severin, D.; Wucher, A.

2018-06-01

Using a time-of-flight mass spectrometer attached to the UNILAC beamline located at the GSI Helmholtz Centre for Heavy Ion Research, we investigate the formation of secondary ions sputtered from a germanium surface under irradiation by swift heavy ions (SHI) such as 5 MeV/u Au by simultaneously recording the mass spectra of the ejected secondary ions and their neutral counterparts. In these experiments, the sputtered neutral material is post-ionized via single photon absorption from a pulsed, intensive VUV laser. After post-ionization, the instrument cannot distinguish between secondary ions and post-ionized neutrals, so that both signals can be directly compared in order to investigate the ionization probability of different sputtered species. In order to facilitate an in-situ comparison with typical nuclear sputtering conditions, the system is also equipped with a conventional rare gas ion source delivering a 5 keV argon ion beam. For a dynamically sputter cleaned surface, it is found that the ionization probability of Ge atoms and Gen clusters ejected under electronic sputtering conditions is by more than an order of magnitude higher than that measured for keV sputtered particles. In addition, the mass spectra obtained under SHI irradiation show prominent signals of GenOm clusters, which are predominantly detected as positive or negative secondary ions. From the m-distribution for a given Ge nuclearity n, one can deduce that the sputtered material must originate from a germanium oxide matrix with approximate GeO stoichiometry, probably due to residual native oxide patches even at the dynamically cleaned surface. The results clearly demonstrate a fundamental difference between the ejection and ionization mechanisms in both cases, which is interpreted in terms of corresponding model calculations.

Continuous Wave Ring-Down Spectroscopy Diagnostic for Measuring Argon Ion and Neutral Velocity Distribution Functions in a Helicon Plasma

NASA Astrophysics Data System (ADS)

McCarren, Dustin; Vandervort, Robert; Soderholm, Mark; Carr, Jerry, Jr.; Galante, Matthew; Magee, Richard; Scime, Earl

2013-10-01

Cavity Ring-Down Spectroscopy CRDS is a proven, ultra-sensitive, cavity enhanced absorption spectroscopy technique. When combined with a continuous wavelength (CW) diode laser that has a sufficiently narrow line width, the Doppler broadened absorption line, i.e., the velocity distribution functions (IVDFs), can be measured. Measurements of IVDFS can be made using established techniques, such as laser induced fluorescence (LIF). However, LIF suffers from the requirement that the initial state of the LIF sequence have a substantial density. This usually limits LIF to ions and atoms with large metastable state densities for the given plasma conditions. CW-CRDS is considerably more sensitive than LIF and can potentially be applied to much lower density populations of ion and atom states. In this work we present ongoing measurements of the CW-CRDS diagnostic and discuss the technical challenges of using CW-CRDS to make measurements in a helicon plasma.

Langmuir probe measurements in the intense RF field of a helicon discharge

NASA Astrophysics Data System (ADS)

Chen, Francis F.

2012-10-01

Helicon discharges have extensively been studied for over 25 years both because of their intriguing physics and because of their utility in producing high plasma densities for industrial applications. Almost all measurements so far have been made away from the antenna region in the plasma ejected into a chamber where there may be a strong magnetic field (B-field) but where the radiofrequency (RF) field is much weaker than under the antenna. Inside the source region, the RF field distorts the current-voltage (I-V) characteristic of the probe unless it is specially designed with strong RF compensation. For this purpose, a thin probe was designed and used to show the effect of inadequate compensation on electron temperature (Te) measurements. The subtraction of ion current from the I-V curve is essential; and, surprisingly, Langmuir's orbital motion limited theory for ion current can be used well beyond its intended regime.

Electron diamagnetic effect in a magnetic nozzle on a helicon plasma thruster performance

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Lafleur, Trevor; Charles, Christine; Alexander, Peter; Boswell, Rod

2012-10-01

The axial force, which is called thrust sometimes, imparted from a magnetically expanding helicon plasma thruster is directly measured and the results are compared with a two-dimensional fluid theory. The force component solely transmitted to the expanding field is directly measured and identified as an axial force produced by the azimuthal current due to an electron diamagnetic drift and the radial component of the applied magnetic field. In this type of configuration, plasma diffusion in magnetic field affects a spatial profile of the plasma density and the resultant axial force onto the magnetic field. It is observed that the force component onto the magnetic field increases with an increase in the magnetic field strength, simultaneously with an increase in the plasma density downstream of the source exit, which could be due to suppression of the cross field diffusion in the magnetic nozzle.

Plasma Flow During RF Discharges in VASIMR

NASA Technical Reports Server (NTRS)

Jacobson, V. T.; Chang Diaz, F. R.; Squire, J. P.; Ilin, A. V.; Bengtson, R. D.; Carter, M. D.; Goulding, R. H.

1999-01-01

The Variable Specific Impulse Magnetoplasma Rocket (VASIMR) plasma source consists of a helical antenna, driven at frequencies of 4 to 19 MHz with powers up to 1 kW, in a magnetic field up to 3 kG. Helium is the current test gas, and future experiments with hydrogen are planned. Plasma density and temperature profiles were measured by a reciprocating Langmuir probe, and plasma flow profiles were measured with a reciprocating Mach probe. Both probes were located about 0.5 m downstream from the helical antenna. The plasma source operated in capacitive and inductive modes in addition to a helicon mode. During capacitive and inductive modes, densities were low and plasma flow was < 0.5 Cs. When the plasma operated in a helicon mode, the densities measured downstream from the source were higher [10(exp 12) / cubic cm ] and plasma flow along the magnetic field was of the order Mach 1. Details of the measurements will be shown.

B2.5-Eirene modeling of radial transport in the MAGPIE linear plasma device

NASA Astrophysics Data System (ADS)

Owen, L. W.; Caneses, J. F.; Canik, J.; Lore, J. D.; Corr, C.; Blackwell, B.; Bonnin, X.; Rapp, J.

2017-05-01

Radial transport in helicon heated hydrogen plasmas in the MAGnetized Plasma Interaction Experiment (MAGPIE) is studied with the B2.5-Eirene (SOLPS5.0) code. Radial distributions of plasma density, temperature and ambipolar potential are computed for several magnetic field configurations and compared to double Langmuir probe measurements. Evidence for an unmagnetized ion population is seen in the requirement for a convective pinch term in the continuity equation in order to fit the centrally peaked density profile data. The measured slightly hollow electron temperature profiles are reproduced with combinations of on-axis and edge heating which can be interpreted as helicon and Trivelpiece-Gould wave absorption, respectively. Pressure gradient driven radial charged particle diffusion is chosen to describe the diffusive particle flux since the hollowness of the temperature profiles assists the establishment of on-axis density peaking.

Power matching between plasma generation and electrostatic acceleration in helicon electrostatic thruster

NASA Astrophysics Data System (ADS)

Ichihara, D.; Nakagawa, Y.; Uchigashima, A.; Iwakawa, A.; Sasoh, A.; Yamazaki, T.

2017-10-01

The effects of a radio-frequency (RF) power on the ion generation and electrostatic acceleration in a helicon electrostatic thruster were investigated with a constant discharge voltage of 300 V using argon as the working gas at a flow rate either of 0.5 Aeq (Ampere equivalent) or 1.0 Aeq. A RF power that was even smaller than a direct-current (DC) discharge power enhanced the ionization of the working gas, thereby both the ion beam current and energy were increased. However, an excessively high RF power input resulted in their saturation, leading to an unfavorable increase in an ionization cost with doubly charged ion production being accompanied. From the tradeoff between the ion production by the RF power and the electrostatic acceleration made by the direct current discharge power, the thrust efficiency has a maximum value at an optimal RF to DC discharge power ratio of 0.6 - 1.0.

Penetration of ELF currents and electromagnetic fields into the Earth's equatorial ionosphere

NASA Astrophysics Data System (ADS)

Eliasson, B.; Papadopoulos, K.

2009-10-01

The penetration of extremely low frequency (ELF) transient electromagnetic fields and associated currents in the Earth's equatorial E-region plasma is studied theoretically and numerically. In the low-frequency regime, the plasma dynamics of the E-region is characterized by helicon waves since the ions are viscously coupled to neutrals while the electrons remain mobile. For typical equatorial E-region parameters, the plasma is magnetically insulated from penetration of very long timescale magnetic fields by a thin diffusive sheath. Wave penetration driven by a vertically incident pulse localized in space and time leads to both vertical penetration and the triggering of ELF helicon/whistler waves that carry currents obliquely to the magnetic field lines. The study presented here may have relevance for ELF wave generation by lightning discharges and seismic activity and can lead to new concepts in ELF/ULF injection in the earth-ionosphere waveguide.

Sputtering of sodium and potassium from nepheline: Secondary ion yields and velocity spectra

NASA Astrophysics Data System (ADS)

Martinez, R.; Langlinay, Th.; Ponciano, C. R.; da Silveira, E. F.; Palumbo, M. E.; Strazzulla, G.; Brucato, J. R.; Hijazi, H.; Agnihotri, A. N.; Boduch, P.; Cassimi, A.; Domaracka, A.; Ropars, F.; Rothard, H.

2017-09-01

Silicates are the dominant surface material of many Solar System objects, which are exposed to ion bombardment by solar wind ions and cosmic rays. Induced physico-chemical processes include sputtering which can contribute to the formation of an exosphere. We have measured sputtering yields and velocity spectra of secondary ions ejected from nepheline, an aluminosilicate thought to be a good analogue for Mercury's surface, as a laboratory approach to understand the evolution of silicate surfaces and the presence of Na and K vapor in the exosphere. Experiments were performed with highly charged ion beams (keV/u-MeV/u) delivered by GANIL using an imaging XY-TOF-SIMS device under UHV conditions. The fluence dependence of sputtering yields gives information about the evolution of surface stoichiometry during irradiation. From the energy distributions N(E) of sputtered particles, the fraction of particles which could escape from the gravitational field of Mercury, and of those falling back and possibly contributing to populate the exosphere can be roughly estimated.

Effects of sputtering mode on the microstructure and ionic conductivity of yttria-stabilized zirconia films

NASA Astrophysics Data System (ADS)

Yeh, Tsung-Her; Lin, Ruei-De; Cherng, Bo-Ruei; Cherng, Jyh-Shiarn

2018-05-01

The microstructure and ionic conductivity of reactively sputtered yttria-stabilized zirconia (YSZ) films are systematically studied. Those films were reactively sputtered in various sputtering modes using a closed-loop controlled system with plasma emission monitoring. A transition-mode sputtering corresponding to 45% of target poisoning produces a microstructure with ultrafine crystallites embedded in an amorphous matrix, which undergoes an abnormal grain growth upon annealing at 800 °C. At 500 °C, the measured ionic conductivity of this annealed film is higher, by about a half order of magnitude, than those of its poisoned-mode counterparts, which are in turn significantly higher than that of the YSZ bulk by about two orders of magnitude. The abnormally-grown ultra-large grain size of the film deposited in the transition mode and then annealed is believed to be responsible for the former comparison due to the suppression of the grain boundary blocking effect, while the latter comparison can be attributed to the interface effect.

The Use of OXYGEN-18 in the Development of Methods for Controlled Sputter Deposition of High Critical Transition Temperature Material Thin Films of Predicted Composition and Good Uniformity

NASA Astrophysics Data System (ADS)

Tidrow, Steven Clay

Two primary concerns, in the sputter deposition of high T_{c} material films, are the prevention of oxygen deficiency in the films and the elimination of the negative ion effect. "Oxygen deficiency" occurs when the amount of oxygen incorporated into the film is less than the amount of oxygen required to form the superconducting material lattice. Oxygen deficiency is due to the volatile nature of oxygen. The negative ion effect occurs when an atom or molecule (typically oxygen) gains an extra electron, is accelerated away from the target and impinges upon a film being grown directly in front of the sputtering target. The impinging particle has enough energy to cause resputtering of the deposited film. The presence of Sr and to a greater extent Ba, may enhance the negative ion effect in these materials. However, it is oxygen which readily forms negative ions that is primarily responsible for the negative ion effect. Thus, oxygen must be given special attention in the sputter deposition of high T_{c} material films. A specially designed sputtering system is used to demonstrate that the negative ion effect can be reduced such that large uniform high T_{c} material films possessing predicted and repeated composition can be grown in an on-axis arrangement. Utilizing this same sputtering system and the volatile nature of oxygen, it is demonstrated that oxygen processes occurring in the chamber during growth of high T_ {c} material films can be investigated using the tracer ^{18}O. In particular, it is shown that ^{18}O can be utilized as a tool for (1) investigating the negative ion effect, (2) investigating oxygen incorporation into high T_{c} material films, (3) investigating oxygen incorporation into the target, (4) tailoring films for oxygen migration and interface investigations and (5) tailoring films for the other specific oxygen investigations. Such sputtering systems that utilize the tracer ^{18}O are necessary for systematic growth of high T_ {c} material films for systematic investigations into the nature of these materials.

The Deposition of Multicomponent Films for Electrooptic Applications via a Computer Controlled Dual Ion Beam Sputtering System

DTIC Science & Technology

1991-12-31

AD-A252 218 The Deposition of Multicomponent Films for Electrooptic Applications via a Computer Controlled Dual Ion Beam Sputtering System ONR...6 3 2. Deposition of Electrooptic Thin Films ................................... 11 3. High Resolution Imaging of Twin and Antiphase...Domain Boundaries in Perovskite KNbO3 Thin Films .......... 30 4. Microstructural Characterization of the Epitaxial3 (111) KNbO3 on (0001) Sapphire

Full System Model of Magnetron Sputter Chamber - Proof-of-Principle Study

DOE Office of Scientific and Technical Information (OSTI.GOV)

Walton, C; Gilmer, G; Zepeda-Ruiz, L

2007-05-04

The lack of detailed knowledge of internal process conditions remains a key challenge in magnetron sputtering, both for chamber design and for process development. Fundamental information such as the pressure and temperature distribution of the sputter gas, and the energies and arrival angles of the sputtered atoms and other energetic species is often missing, or is only estimated from general formulas. However, open-source or low-cost tools are available for modeling most steps of the sputter process, which can give more accurate and complete data than textbook estimates, using only desktop computations. To get a better understanding of magnetron sputtering, wemore » have collected existing models for the 5 major process steps: the input and distribution of the neutral background gas using Direct Simulation Monte Carlo (DSMC), dynamics of the plasma using Particle In Cell-Monte Carlo Collision (PIC-MCC), impact of ions on the target using molecular dynamics (MD), transport of sputtered atoms to the substrate using DSMC, and growth of the film using hybrid Kinetic Monte Carlo (KMC) and MD methods. Models have been tested against experimental measurements. For example, gas rarefaction as observed by Rossnagel and others has been reproduced, and it is associated with a local pressure increase of {approx}50% which may strongly influence film properties such as stress. Results on energies and arrival angles of sputtered atoms and reflected gas neutrals are applied to the Kinetic Monte Carlo simulation of film growth. Model results and applications to growth of dense Cu and Be films are presented.« less

Matrix Sputtering Method: A Novel Physical Approach for Photoluminescent Noble Metal Nanoclusters.

PubMed

Ishida, Yohei; Corpuz, Ryan D; Yonezawa, Tetsu

2017-12-19

Noble metal nanoclusters are believed to be the transition between single metal atoms, which show distinct optical properties, and metal nanoparticles, which show characteristic plasmon absorbance. The interesting properties of these materials emerge when the particle size is well below 2 nm, such as photoluminescence, which has potential application particularly in biomedical fields. These photoluminescent ultrasmall nanoclusters are typically produced by chemical reduction, which limits their practical application because of the inherent toxicity of the reagents used in this method. Thus, alternative strategies are sought, particularly in terms of physical approaches, which are known as "greener alternatives," to produce high-purity materials at high yields. Thus, a new approach using the sputtering technique was developed. This method was initially used to produce thin films using solid substrates; now it can be applied even with liquid substrates such as ionic liquids or polyethylene glycol as long as these liquids have a low vapor pressure. This revolutionary development has opened up new areas of research, particularly for the synthesis of colloidal nanoparticles with dimensions below 10 nm. We are among the first to apply the sputtering technique to the physical synthesis of photoluminescent noble metal nanoclusters. Although typical sputtering systems have relied on the effect of surface composition and viscosity of the liquid matrix on controlling particle diameters, which only resulted in diameters ca. 3-10 nm, that were all plasmonic, our new approach introduced thiol molecules as stabilizers inspired from chemical methods. In the chemical syntheses of metal nanoparticles, controlling the concentration ratio between metal ions and stabilizing reagents is a possible means of systematic size control. However, it was not clear whether this would be applicable in a sputtering system. Our latest results showed that we were able to generically produce a variety of photoluminescent monometallic nanoclusters of Au, Ag, and Cu, all of which showed stable emission in both solution and solid form via our matrix sputtering method with the induction of cationic-, neutral-, and anionic-charged thiol ligands. We also succeeded in synthesizing photoluminescent bimetallic Au-Ag nanoclusters that showed tunable emission within the UV-NIR region by controlling the composition of the atomic ratio by a double-target sputtering technique. Most importantly, we have revealed the formation mechanism of these unique photoluminescent nanoclusters by sputtering, which had relatively larger diameters (ca. 1-3 nm) as determined using TEM and stronger emission quantum yield (max. 16.1%) as compared to typical photoluminescent nanoclusters prepared by chemical means. We believe the high tunability of sputtering systems presented here has significant advantages for creating novel photoluminescent nanoclusters as a complementary strategy to common chemical methods. This Account highlights our journey toward understanding the photophysical properties and formation mechanism of photoluminescent noble metal nanoclusters via the sputtering method, a novel strategy that will contribute widely to the body of scientific knowledge of metal nanoparticles and nanoclusters.

Ion acceleration in a helicon source due to the self-bias effect

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wiebold, Matt; Sung, Yung-Ta; Scharer, John E.

2012-05-15

Time-averaged plasma potential differences up to 165 V over several hundred Debye lengths are observed in low pressure (p{sub n} < 1 mTorr) expanding argon plasmas in the Madison Helicon eXperiment (MadHeX). The potential gradient leads to ion acceleration greater than that predicted by ambipolar expansion, exceeding E{sub i} Almost-Equal-To 7 kT{sub e} in some cases. RF power up to 500 W at 13.56 MHz is supplied to a half-turn, double-helix antenna in the presence of a nozzle magnetic field, adjustable up to 1 kG. A retarding potential analyzer (RPA) measures the ion energy distribution function (IEDF) and a sweptmore » emissive probe measures the plasma potential. Single and double probes measure the electron density and temperature. Two distinct mode hops, the capacitive-inductive (E-H) and inductive-helicon (H-W) transitions, are identified by jumps in density as RF power is increased. In the capacitive (E) mode, large fluctuations of the plasma potential (V{sub p-p} Greater-Than-Or-Equivalent-To 140V, V{sub p-p}/V{sub p} Almost-Equal-To 150%) exist at the RF frequency and its harmonics. The more mobile electrons can easily respond to RF-timescale gradients in the plasma potential whereas the inertially constrained ions cannot, leading to an initial flux imbalance and formation of a self-bias voltage between the source and expansion chambers. In the capacitive mode, the ion acceleration is not well described by an ambipolar relation, while in the inductive and helicon modes the ion acceleration more closely follows an ambipolar relation. The scaling of the potential gradient with the argon flow rate and RF power are investigated, with the largest potential gradients observed for the lowest flow rates in the capacitive mode. The magnitude of the self-bias voltage agrees with that predicted for RF self-bias at a wall. Rapid fluctuations in the plasma potential result in a time-dependent axial electron flux that acts to 'neutralize' the accelerated ion population, resulting in a zero net time-averaged current through the acceleration region when an insulating upstream boundary condition is enforced. Grounding the upstream endplate increases the self-bias voltage compared to a floating endplate.« less

In situ electrical resistivity measurements of vanadium thin films performed in vacuum during different annealing cycles

NASA Astrophysics Data System (ADS)

Pedrosa, Paulo; Cote, Jean-Marc; Martin, Nicolas; Arab Pour Yazdi, Mohammad; Billard, Alain

2017-02-01

The present study describes a sputtering and in situ vacuum electrical resistivity setup that allows a more efficient sputtering-oxidation coupling process for the fabrication of oxide compounds like vanadium dioxide, VO2. After the sputtering deposition of pure V thin films, the proposed setup enables the sample holder to be transferred from the sputtering to the in situ annealing + resistivity chamber without venting the whole system. The thermal oxidation of the V films was studied by implementing two different temperature cycles up to 550 °C, both in air (using a different resistivity setup) and vacuum conditions. Main results show that the proposed system is able to accurately follow the different temperature setpoints, presenting clean and low-noise resistivity curves. Furthermore, it is possible to identify the formation of different vanadium oxide phases in air, taking into account the distinct temperature cycles used. The metallic-like electrical properties of the annealed coatings are maintained in vacuum whereas those heated in air produce a vanadium oxide phase mixture.

In situ electrical resistivity measurements of vanadium thin films performed in vacuum during different annealing cycles.

PubMed

Pedrosa, Paulo; Cote, Jean-Marc; Martin, Nicolas; Arab Pour Yazdi, Mohammad; Billard, Alain

2017-02-01

The present study describes a sputtering and in situ vacuum electrical resistivity setup that allows a more efficient sputtering-oxidation coupling process for the fabrication of oxide compounds like vanadium dioxide, VO 2 . After the sputtering deposition of pure V thin films, the proposed setup enables the sample holder to be transferred from the sputtering to the in situ annealing + resistivity chamber without venting the whole system. The thermal oxidation of the V films was studied by implementing two different temperature cycles up to 550 °C, both in air (using a different resistivity setup) and vacuum conditions. Main results show that the proposed system is able to accurately follow the different temperature setpoints, presenting clean and low-noise resistivity curves. Furthermore, it is possible to identify the formation of different vanadium oxide phases in air, taking into account the distinct temperature cycles used. The metallic-like electrical properties of the annealed coatings are maintained in vacuum whereas those heated in air produce a vanadium oxide phase mixture.

Langmuir Probe Measurements in a Grid-Assisted Magnetron Sputtering System

NASA Astrophysics Data System (ADS)

Sagás, Julio César; Pessoa, Rodrigo Sávio; Maciel, Homero Santiago

2018-02-01

The grid-assisted magnetron sputtering is a variation of the magnetron sputtering commonly used for thin film deposition. In this work, Langmuir probe measurements were performed in such a system by using the grid under two basic and practical electrical conditions, i.e., floating and grounded. The results show that grounding the grid leads to an enhancement of the plasma confinement and to increases in both floating and plasma potential, as inferred from the probe characteristics. The grounded grid drains electrons from the plasma, acting as an auxiliary anode and reducing the plasma diffusion toward the chamber walls. For the same discharge current, the improved confinement results in a lower electron temperature when compared to floating condition, although the electron densities are comparable in both cases.

Negative ion source development for a photoneutralization based neutral beam system for future fusion reactors

NASA Astrophysics Data System (ADS)

Simonin, A.; Agnello, R.; Bechu, S.; Bernard, J. M.; Blondel, C.; Boeuf, J. P.; Bresteau, D.; Cartry, G.; Chaibi, W.; Drag, C.; Duval, B. P.; de Esch, H. P. L.; Fubiani, G.; Furno, I.; Grand, C.; Guittienne, Ph; Howling, A.; Jacquier, R.; Marini, C.; Morgal, I.

2016-12-01

In parallel to the developments dedicated to the ITER neutral beam (NB) system, CEA-IRFM with laboratories in France and Switzerland are studying the feasibility of a new generation of NB system able to provide heating and current drive for the future DEMOnstration fusion reactor. For the steady-state scenario, the NB system will have to provide a high NB power level with a high wall-plug efficiency (η ˜ 60%). Neutralization of the energetic negative ions by photodetachment (so called photoneutralization), if feasible, appears to be the ideal solution to meet these performances, in the sense that it could offer a high beam neutralization rate (>80%) and a wall-plug efficiency higher than 60%. The main challenge of this new injector concept is the achievement of a very high power photon flux which could be provided by 3 MW Fabry-Perot optical cavities implanted along the 1 MeV D- beam in the neutralizer stage. The beamline topology is tall and narrow to provide laminar ion beam sheets, which will be entirely illuminated by the intra-cavity photon beams propagating along the vertical axis. The paper describes the present R&D (experiments and modelling) addressing the development of a new ion source concept (Cybele source) which is based on a magnetized plasma column. Parametric studies of the source are performed using Langmuir probes in order to characterize and compare the plasma parameters in the source column with different plasma generators, such as filamented cathodes, radio-frequency driver and a helicon antenna specifically developed at SPC-EPFL satisfying the requirements for the Cybele (axial magnetic field of 10 mT, source operating pressure: 0.3 Pa in hydrogen or deuterium). The paper compares the performances of the three plasma generators. It is shown that the helicon plasma generator is a very promising candidate to provide an intense and uniform negative ion beam sheet.

Process Parameter-Growth Environment-Film Property Relationships for Reactive Sputter Deposited Metal (V, Nb, Zr, Y, Au) Oxide, Nitride, and Oxynitride Films

DTIC Science & Technology

1993-09-30

speed of light in vac- ring within the first 5 min of exposure. In a separate ex- uum, and g(A) is the detected fraction of emitted radia- periment...fold: film growth by reactive sputter deposition, in situ discharge diagnostics, film charcterization. A radio frequency diode apparatus was used to...l-’ZrO, films is reported.)3 1) Films were grown on Supers!]I II fused silica in a hot-oil pumped rf diode sputter deposition system using a 13-cm

Generalized Keller-Simmons formula for nonisothermal plasma-assisted sputtering depositions

DOE Office of Scientific and Technical Information (OSTI.GOV)

Palmero, A.; Rudolph, H.; Habraken, F. H. P. M.

2006-11-20

A general description of the relation between the sputtering rate and the deposition rate in plasma-assisted sputtering deposition has been developed. The equation derived yields the so-called Keller-Simmons [IBM J. Res. Dev. 23, 24 (1979)] formula in the limit of zero thermal gradients in the deposition system. It is shown that the Keller-Simmons formula can still be applied to fit the experimental results if the characteristic pressure-distance product, p{sub 0}L{sub 0}, is related to the temperature of the sputter cathode and the growing film. Using this relation, it is found that the variations in the values for p{sub 0}L{sub 0}more » for different experimental conditions agree with the thus far not well understood experimental trends reported in the literature.« less

Sputtering phenomena in ion thrusters

NASA Technical Reports Server (NTRS)

Robinson, R. S.; Rossnagel, S. M.

1983-01-01

Sputtering effects in discharge chambers of ion thrusters are lifetime limiting in basically two ways: (1) ion bombardment of critical thruster components at energies sufficient to cause sputtering removes significant quantities of material; enough to degrade operation through adverse dimensional changes or possibly lead to complete component failure, and (2) metals sputtered from these intensely bombarded components are deposited in other locations as thin films and subsequently flake or peel off; the flakes then lodge elsewhere in the discharge chamber with the possibility of providing conductive paths for short circuiting of thruster components such as the ion optics. This experimental work has concentrated in two areas. The first has been to operate thrusters for multi-hour periods and to observe and measure the films found inside the thruster. The second was to simulate the environment inside the discharge chamber of the thruster by means of a dual ion beam system. Here, films were sputter deposited in the presence of a second low energy bombarding beam to simulate film deposition on thruster interior surfaces that undergo simultaneous sputtering and deposition. Mo presents serious problems for use in a thruster as far as film deposition is concerned. Mo films were found to be in high stress, making them more likely to peel and flake.

Investigation of Influence of Gas Ratio on the Electron Temperature in TiN Magnetron Sputtering Deposition System

DTIC Science & Technology

2013-07-01

31st ICPIG, July 14-19, 2013, Granada , Spain Investigation of Influence of Gas Ratio on the Electron Temperature in TiN Magnetron Sputtering...ICPIG) Held in Granada , Spain on 14-19 July 2013 14. ABSTRACT In this work, a nanolayer of titanium nitride which produced by the magnetron

Experimental results from plasma transport on Prototype-Material Plasma Exposure eXperiment and comparison with B2-Eirene modeling

NASA Astrophysics Data System (ADS)

Kafle, N.; Caneses, J. F.; Biewer, T. M.; Owen, L.; Showers, M.; Donovan, D.; Caughman, J. B.; Goulding, R. H.; Rapp, Juergen

2017-10-01

Proto-MPEX at ORNL is a linear plasma device that combines a helicon plasma source with additional microwave and RF heating to deliver high plasma heat and particle fluxes to a target. Double Langmuir probes and Thomson scattering are being used to measure local Te and ne at various radial and axial locations. A recently constructed Mach- double probe provides the added capability of simultaneously measuring Te, ne, and Mach number. With this diagnostic, it is possible to infer the plasma flow, particle flux, and convective heat flux at different locations along the plasma column in Proto-MPEX. Preliminary results show Mach numbers of 0.6 and 0.8 in either direction away from the helicon source, and no flow near the source for the case where the peak magnetic field was 1.0 T. In addition, the Thomson Scattering system has been upgraded to measure ne and Te profiles at two axial locations, upstream at the electron heating location and downstream close to the target. Measurements of particle flow and flux profiles, heat flux, and profiles of ne and Te will be discussed. The extensive coverage provided by these diagnostics permits data-constrained B2-Eirene modeling of the entire plasma column, and comparison with results of modeling of high density mode plasmas will be presented. Supported by the US. D.O.E. contract DE-AC05-00OR22725.

Post-annealing-free, room temperature processed nanocrystalline indium tin oxide thin films for plastic electronics

NASA Astrophysics Data System (ADS)

Nyoung Jang, Jin; Jong Lee, You; Jang, YunSung; Yun, JangWon; Yi, Seungjun; Hong, MunPyo

2016-06-01

In this study, we confirm that bombardment by high energy negative oxygen ions (NOIs) is the key origin of electro-optical property degradations in indium tin oxide (ITO) thin films formed by conventional plasma sputtering processes. To minimize the bombardment effect of NOIs, which are generated on the surface of the ITO targets and accelerated by the cathode sheath potential on the magnetron sputter gun (MSG), we introduce a magnetic field shielded sputtering (MFSS) system composed of a permanent magnetic array between the MSG and the substrate holder to block the arrival of energetic NOIs. The MFSS processed ITO thin films reveal a novel nanocrystal imbedded polymorphous structure, and present not only superior electro-optical characteristics but also higher gas diffusion barrier properties. To the best of our knowledge, no gas diffusion barrier composed of a single inorganic thin film formed by conventional plasma sputtering processes achieves such a low moisture permeability.

Wave modeling in a cylindrical non-uniform helicon discharge

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chang, L.; Hole, M. J.; Caneses, J. F.

2012-08-15

A radio frequency field solver based on Maxwell's equations and a cold plasma dielectric tensor is employed to describe wave phenomena observed in a cylindrical non-uniform helicon discharge. The experiment is carried out on a recently built linear plasma-material interaction machine: The magnetized plasma interaction experiment [Blackwell et al., Plasma Sources Sci. Technol. (submitted)], in which both plasma density and static magnetic field are functions of axial position. The field strength increases by a factor of 15 from source to target plate, and the plasma density and electron temperature are radially non-uniform. With an enhancement factor of 9.5 to themore » electron-ion Coulomb collision frequency, a 12% reduction in the antenna radius, and the same other conditions as employed in the experiment, the solver produces axial and radial profiles of wave amplitude and phase that are consistent with measurements. A numerical study on the effects of axial gradient in plasma density and static magnetic field on wave propagations is performed, revealing that the helicon wave has weaker attenuation away from the antenna in a focused field compared to a uniform field. This may be consistent with observations of increased ionization efficiency and plasma production in a non-uniform field. We find that the relationship between plasma density, static magnetic field strength, and axial wavelength agrees well with a simple theory developed previously. A numerical scan of the enhancement factor to the electron-ion Coulomb collision frequency from 1 to 15 shows that the wave amplitude is lowered and the power deposited into the core plasma decreases as the enhancement factor increases, possibly due to the stronger edge heating for higher collision frequencies.« less

Whistlers, Helicons, Lower Hybrid Waves: the Physics of RF Wave Absorption Without Cyclotron Resonances

NASA Astrophysics Data System (ADS)

Pinsker, R. I.

2014-10-01

In hot magnetized plasmas, two types of linear collisionless absorption processes are used to heat and drive noninductive current: absorption at ion or electron cyclotron resonances and their harmonics, and absorption by Landau damping and the transit-time-magnetic-pumping (TTMP) interactions. This tutorial discusses the latter process, i.e., parallel interactions between rf waves and electrons in which cyclotron resonance is not involved. Electron damping by the parallel interactions can be important in the ICRF, particularly in the higher harmonic region where competing ion cyclotron damping is weak, as well as in the Lower Hybrid Range of Frequencies (LHRF), which is in the neighborhood of the geometric mean of the ion and electron cyclotron frequencies. On the other hand, absorption by parallel processes is not significant in conventional ECRF schemes. Parallel interactions are especially important for the realization of high current drive efficiency with rf waves, and an application of particular recent interest is current drive with the whistler or helicon wave at high to very high (i.e., the LHRF) ion cyclotron harmonics. The scaling of absorption by parallel interactions with wave frequency is examined and the advantages and disadvantages of fast (helicons/whistlers) and slow (lower hybrid) waves in the LHRF in the context of reactor-grade tokamak plasmas are compared. In this frequency range, both wave modes can propagate in a significant fraction of the discharge volume; the ways in which the two waves can interact with each other are considered. The use of parallel interactions to heat and drive current in practice will be illustrated with examples from past experiments; also looking forward, this tutorial will provide an overview of potential applications in tokamak reactors. Supported by the US Department of Energy under DE-FC02-04ER54698.

Plasma source development for fusion-relevant material testing

DOE PAGES

Caughman, John B. O.; Goulding, Richard H.; Biewer, Theodore M.; ...

2017-05-01

Plasma facing materials in the divertor of a magnetic fusion reactor will have to tolerate steady-state plasma heat fluxes in the range of 10 MW/m2 for ~107 sec, in addition to fusion neutron fluences, which can damage the plasma facing materials to high displacements per atom (dpa) of ~50 dpa . Material solutions needed for the plasma facing components are yet to be developed and tested. The Materials Plasma Exposure eXperiment (MPEX) is a newly proposed steady state linear plasma device that is designed to deliver the necessary plasma heat flux to a target for this material testing, including themore » capability to expose a-priori neutron damaged material samples to those plasmas. The requirements of the plasma source needed to deliver this plasma heat flux are being developed on the Proto-MPEX device, which is a linear high-intensity radio frequency (RF) plasma source that combines a high-density helicon plasma generator with electron and ion heating sections. It is being used to study the physics of heating over-dense plasmas in a linear configuration. The helicon plasma is operated at 13.56 MHz with RF power levels up to 120 kW. Microwaves at 28 GHz (~30 kW) are coupled to the electrons in the over-dense helicon plasma via Electron Bernstein Waves (EBW), and ion cyclotron heating at 7-9 MHz (~30 kW) is via a magnetic beach approach. High plasma densities >6x1019/m3 have been produced in deuterium, with electron temperatures that can range from 2 to >10 eV. Operation with on-axis magnetic field strengths between 0.6 and 1.4 T is typical. The plasma heat flux delivered to a target can be > 10 MW/m2, depending on the operating conditions.« less

Plasma source development for fusion-relevant material testing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Caughman, John B. O.; Goulding, Richard H.; Biewer, Theodore M.

Plasma facing materials in the divertor of a magnetic fusion reactor will have to tolerate steady-state plasma heat fluxes in the range of 10 MW/m2 for ~107 sec, in addition to fusion neutron fluences, which can damage the plasma facing materials to high displacements per atom (dpa) of ~50 dpa . Material solutions needed for the plasma facing components are yet to be developed and tested. The Materials Plasma Exposure eXperiment (MPEX) is a newly proposed steady state linear plasma device that is designed to deliver the necessary plasma heat flux to a target for this material testing, including themore » capability to expose a-priori neutron damaged material samples to those plasmas. The requirements of the plasma source needed to deliver this plasma heat flux are being developed on the Proto-MPEX device, which is a linear high-intensity radio frequency (RF) plasma source that combines a high-density helicon plasma generator with electron and ion heating sections. It is being used to study the physics of heating over-dense plasmas in a linear configuration. The helicon plasma is operated at 13.56 MHz with RF power levels up to 120 kW. Microwaves at 28 GHz (~30 kW) are coupled to the electrons in the over-dense helicon plasma via Electron Bernstein Waves (EBW), and ion cyclotron heating at 7-9 MHz (~30 kW) is via a magnetic beach approach. High plasma densities >6x1019/m3 have been produced in deuterium, with electron temperatures that can range from 2 to >10 eV. Operation with on-axis magnetic field strengths between 0.6 and 1.4 T is typical. The plasma heat flux delivered to a target can be > 10 MW/m2, depending on the operating conditions.« less

Electron reflection and secondary emission characteristics of sputter-textured pyrolytic graphite surfaces

NASA Technical Reports Server (NTRS)

Wintucky, E. G.; Curren, A. N.; Sovey, J. S.

1981-01-01

Low secondary and reflected primary electron emission from the collector electrode surfaces is important for optimum collector efficiency and hence for high overall efficiency of microwave amplifier tubes used in communication satellites and in military systems. Ion sputter texturing of the surface effectively suppresses electron emission from pyrolytic graphite, which is a promising collector electrode material. Secondary and reflected primary electron emission characteristics of sputter textured pyrolytic graphite surfaces with microstructures of various sizes and densities are presented. The microstructure with the lowest electron emission levels, less than those of soot, consists of a dense array of tall, thin spires.

Infrared metamaterial by RF magnetron sputtered ZnO/Al:ZnO multilayers

NASA Astrophysics Data System (ADS)

Santiago, Kevin C.; Mundle, Rajeh; White, Curtis; Bahoura, Messaoud; Pradhan, Aswini K.

2018-03-01

Hyperbolic metamaterials create artificial anisotropy using metallic wires suspended in dielectric media or alternating layers of a metal and dielectric (Type I or Type II). In this study we fabricated ZnO/Al:ZnO (AZO) multilayers by the RF magnetron sputtering deposition technique. Our fabricated multilayers satisfy the requirements for a type II hyperbolic metamaterial. The optical response of individual AZO and ZnO films, as well as the multilayered film were investigated via UV-vis-IR transmittance and spectroscopic ellipsometry. The optical response of the multilayered system is calculated using the nonlocal-corrected Effective Medium Approximation (EMA). The spectroscopic ellipsometry data of the multilayered system was modeled using a uniaxial material model and EMA model. Both theoretical and experimental studies validate the fabricated multilayers undergo a hyperbolic transition at a wavelength of 2.2 μm. To our knowledge this is the first AZO/ZnO type II hyperbolic metamaterial system fabricated by magnetron sputtering deposition method.

Sputtered pin amorphous silicon semi-conductor device and method therefor

DOEpatents

Moustakas, Theodore D.; Friedman, Robert A.

1983-11-22

A high efficiency amorphous silicon PIN semi-conductor device is constructed by the sequential sputtering of N, I and P layers of amorphous silicon and at least one semi-transparent ohmic electrode. A method of construction produces a PIN device, exhibiting enhanced physical integrity and facilitates ease of construction in a singular vacuum system and vacuum pump down procedure.

Characterization of sp3 bond content of carbon films deposited by high power gas injection magnetron sputtering method by UV and VIS Raman spectroscopy.

PubMed

Zdunek, Krzysztof; Chodun, Rafał; Wicher, Bartosz; Nowakowska-Langier, Katarzyna; Okrasa, Sebastian

2018-04-05

This paper presents the results of investigations of carbon films deposited by a modified version of the magnetron sputtering method - HiPGIMS (High Power Gas Injection Magnetron Sputtering). In this experiment, the magnetron system with inversely polarized electrodes (sputtered cathode at ground potential and positively biased, spatially separated anode) was used. This arrangement allowed us to conduct the experiment using voltages ranging from 1 to 2kV and a power supply system equipped with 25/50μF capacitor battery. Carbon films were investigated by VIS/UV Raman spectroscopy. Sp 3 /sp 2 bonding ratio was evaluated basing the elementary components of registered spectra. Our investigation showed that sp 3 bond content increases with discharge power but up to specific value only. In extreme conditions of generating plasma impulses, we detected a reversed relation of the sp 3 /sp 2 ratio. In our opinion, a energy of plasma pulse favors nucleation of a sp 3 phase because of a relatively higher ionization state but in extreme cases the influence of energy is reversed. Copyright © 2018 Elsevier B.V. All rights reserved.

Sputtering. [as deposition technique in mechanical engineering

NASA Technical Reports Server (NTRS)

Spalvins, T.

1976-01-01

This paper primarily reviews the potential of using the sputtering process as a deposition technique; however, the manufacturing and sputter etching aspects are also discussed. Since sputtering is not regulated by classical thermodynamics, new multicomponent materials can be developed in any possible chemical composition. The basic mechanism for dc and rf sputtering is described. Sputter-deposition is described in terms of the unique advantageous features it offers such as versatility, momentum transfer, stoichiometry, sputter-etching, target geometry (coating complex surfaces), precise controls, flexibility, ecology, and sputtering rates. Sputtered film characteristics, such as strong adherence and coherence and film morphology, are briefly evaluated in terms of varying the sputtering parameters. Also described are some of the specific industrial areas which are turning to sputter-deposition techniques.

Study of axial double layer in helicon plasma by optical emission spectroscopy and simple probe

NASA Astrophysics Data System (ADS)

Gao, ZHAO; Wanying, ZHU; Huihui, WANG; Qiang, CHEN; Chang, TAN; Jiting, OUYANG

2018-07-01

In this work we used a passive measurement method based on a high-impedance electrostatic probe and an optical emission spectroscope (OES) to investigate the characteristics of the double layer (DL) in an argon helicon plasma. The DL can be confirmed by a rapid change in the plasma potential along the axis. The axial potential variation of the passive measurement shows that the DL forms near a region of strong magnetic field gradient when the plasma is operated in wave-coupled mode, and the DL strength increases at higher powers in this experiment. The emission intensity of the argon atom line, which is strongly dependent on the metastable atom concentration, shows a similar spatial distribution to the plasma potential along the axis. The emission intensity of the argon atom line and the argon ion line in the DL suggests the existence of an energetic electron population upstream of the DL. The electron density upstream is much higher than that downstream, which is mainly caused by these energetic electrons.

Trivelpiece-Gould modes in a uniform unbounded plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Stenzel, R. L.; Urrutia, J. M.

Trivelpiece-Gould (TG) modes originally described electrostatic surface waves on an axially magnetized cylindrical plasma column. Subsequent studies of electromagnetic waves in such plasma columns revealed two modes, a predominantly magnetic helicon mode (H) and the mixed magnetic and electrostatic Trivelpiece-Gould modes (TG). The latter are similar to whistler modes near the oblique cyclotron resonance in unbounded plasmas. The wave propagation in cylindrical geometry is assumed to be paraxial while the modes exhibit radial standing waves. The present work shows that TG modes also arise in a uniform plasma without radial standing waves. It is shown experimentally that oblique cyclotron resonancemore » arises in large mode number helicons. Their azimuthal wave number far exceeds the axial wave number which creates whistlers near the oblique cyclotron resonance. Cyclotron damping absorbs the TG mode and can energize electrons in the center of a plasma column rather than the edge of conventional TG modes. The angular orbital field momentum can produce new perpendicular wave-particle interactions.« less

Injection of a coaxial-gun-produced magnetized plasma into a background helicon plasma

NASA Astrophysics Data System (ADS)

Zhang, Yue; Lynn, Alan; Gilmore, Mark; Hsu, Scott

2014-10-01

A compact coaxial plasma gun is employed for experimental investigation of plasma bubble relaxation into a lower density background plasma. Experiments are being conducted in the linear device HelCat at UNM. The gun is powered by a 120-uF ignitron-switched capacitor bank, which is operated in a range of 5 to 10 kV and 100 kA. Multiple diagnostics are employed to investigate the plasma relaxation process. Magnetized argon plasma bubbles with velocities 1.2Cs, densities 1020 m-3 and electron temperature 13eV have been achieved. The background helicon plasma has density 1013 m-3, magnetic field from 200 to 500 Gauss and electron temperature 1eV. Several distinct operational regimes with qualitatively different dynamics are identified by fast CCD camera images. Additionally a B-dot probe array has been employed to measure the spatial toroidal and poloidal magnetic flux evolution to identify plasma bubble configurations. Experimental data and analysis will be presented.

Consideration of neutral beam prompt loss in the design of a tokamak helicon antenna

DOE PAGES

Pace, D. C.; Van Zeeland, M. A.; Fishler, B.; ...

2016-08-02

Neutral beam prompt losses (injected neutrals that ionize such that their first poloidal transit intersects with the wall) can put appreciable power on the outer wall of tokamaks, and this power may damage the wall or other internal components. These prompt losses are simulated including a protruding helicon antenna installation in the DIII-D tokamak and it is determined that 160 kW of power will impact the antenna during the injection of a particular neutral beam. Protective graphite tiles are designed in response to this modeling and the wall shape of the installed antenna is precisely measured to improve the accuracymore » of these calculations. Initial experiments con rm that the antenna component temperature increases according to the amount of neutral beam energy injected into the plasma. Incorporating neutral beam prompt loss considerations into the design of this in-vessel component serves to ensure that adequate protection or cooling is provided.« less

Consideration of neutral beam prompt loss in the design of a tokamak helicon antenna

DOE Office of Scientific and Technical Information (OSTI.GOV)

Pace, D. C.; Van Zeeland, M. A.; Fishler, B.

Neutral beam prompt losses (injected neutrals that ionize such that their first poloidal transit intersects with the wall) can put appreciable power on the outer wall of tokamaks, and this power may damage the wall or other internal components. These prompt losses are simulated including a protruding helicon antenna installation in the DIII-D tokamak and it is determined that 160 kW of power will impact the antenna during the injection of a particular neutral beam. Protective graphite tiles are designed in response to this modeling and the wall shape of the installed antenna is precisely measured to improve the accuracymore » of these calculations. Initial experiments con rm that the antenna component temperature increases according to the amount of neutral beam energy injected into the plasma. Incorporating neutral beam prompt loss considerations into the design of this in-vessel component serves to ensure that adequate protection or cooling is provided.« less

Cutoff Probe for Tokamak SOL Measurement

NASA Astrophysics Data System (ADS)

Na, Byung-Keun; You, Kwang-Ho; Kim, Dae-Woong; You, Shin-Jae; Kim, Jung-Hyung; Chang, Hong-Young

2013-09-01

Since a cutoff probe was developed, there have been a lot of improvements in methodology and analysis for low temperature plasmas. However, in order to apply the cutoff probe to the Tokamak scrape-off layer (SOL), three important issues should be solved - speed, thermal protection, and short-distance (a few mm) wave propagation in magnetized plasmas. In this presentation, the improvement of cutoff probe for Tokamak is shown. The above problems can be solved using the following methods: (a) the cutoff probe can be used with short impulse of a few nano-seconds for speed improvement. (b) Ceramic covers were used for thermal protection. (c) In magnetized plasmas, the cutoff peak can be analyzed using circuit modeling and CST Microwave studio. To verify the proposed methods, the cutoff probe was applied to a Helicon plasma, and the results were compared to laser Thomson scattering results. Based on the result in the Helicon plasma, the cutoff probe will be applied to far-SOL region at the KSTAR 2013 campaign, and SOL region at the later campaign.

Experimental investigation of current free double layers in helicon plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sahu, B. B.; Tarey, R. D.; Ganguli, A.

2014-02-15

The paper presents investigations of current free double layer (CFDL) that forms in helicon plasmas. In contrast to the other work reporting on the same subject, in the present investigations the double layer (DL) forms in a mirror-like magnetic field topology. The RF compensated Langmuir probe measurements show multiple DLs, which are in connection with, the abrupt fall of densities along with potential drop of about 24 V and 18 V. The DLs strengths (e ΔV{sub p})/(k T{sub e}) are about 9.5 and 6, and the corresponding widths are about 6 and 5 D lengths. The potential drop is nearly equal tomore » the thermal anisotropies between the two plasma regions forming the DL, which is present in the plateau region of mirror, unlike the earlier studies on the DL formation in the region of strong gradients in the magnetic field. Also, it presents a qualitative discussion on the mechanism of DL formation.« less

Equilibrium theory of cylindrical discharges with special application to helicons

NASA Astrophysics Data System (ADS)

Curreli, Davide; Chen, Francis F.

2011-11-01

Radiofrequency discharges used in industry often have centrally peaked plasma density profiles n(r) although ionization is localized at the edge, even in the presence of a dc magnetic field. This can be explained with a simple cylindrical model in one dimension as long as the short-circuit effect at the endplates causes a Maxwellian electron distribution. Surprisingly, a universal profile can be obtained, which is self-similar for all discharges with uniform electron temperature Te and neutral density nn. When all collisions and ionizations are radially accounted for, the ion drift velocity toward the wall reaches the Bohm velocity at a radius which can be identified with the sheath edge, thus obviating a pre-sheath calculation. For non-uniform Te and nn, the profiles change slightly but are always peaked on axis. For helicon discharges, iteration with the HELIC code for antenna-wave coupling yields profiles consistent with both energy deposition and diffusion profiles. Calculated density is in absolute-value agreement with experiment.

Formation of annular plasma downstream by magnetic aperture in the helicon experimental device

NASA Astrophysics Data System (ADS)

Ghosh, Soumen; Yadav, S.; Barada, K. K.; Chattopadhyay, P. K.; Ghosh, J.; Pal, R.; Bora, D.

2017-02-01

In the Helicon eXperimental (HeX) device, the geometric aperture is fixed, but the position of the magnetic aperture can be varied. Working with Argon gas in the pressure range of 1 - 10 × 10 - 4 mbar, an annular plasma (density ˜ 10 16 m - 3 ) is formed downstream, always in front of the magnetic aperture. This occurs irrespective of the relative position of the geometric aperture or the presence of a radial electric field. This is in contrary to the earlier proposition made by others that a radial electric field is necessary to produce a hollow plasma profile. Instead, the ionization of neutrals in the radially outer region by the tail electrons, rotating fast due to gradient-B drift in the azimuthal direction, seems to account for the observed off-axis density peaking in the present experiment. This also explains the variation of the plasma annulus diameter seen here by changing the input radio frequency power ( 100 - 800 W ) .

Inorganic material profiling using Arn+ cluster: Can we achieve high quality profiles?

NASA Astrophysics Data System (ADS)

Conard, T.; Fleischmann, C.; Havelund, R.; Franquet, A.; Poleunis, C.; Delcorte, A.; Vandervorst, W.

2018-06-01

Retrieving molecular information by sputtering of organic systems has been concretized in the last years due to the introduction of sputtering by large gas clusters which drastically eliminated the compound degradation during the analysis and has led to strong improvements in depth resolution. Rapidly however, a limitation was observed for heterogeneous systems where inorganic layers or structures needed to be profiled concurrently. As opposed to organic material, erosion of the inorganic layer appears very difficult and prone to many artefacts. To shed some light on these problems we investigated a simple system consisting of aluminum delta layer(s) buried in a silicon matrix in order to define the most favorable beam conditions for practical analysis. We show that counterintuitive to the small energy/atom used and unlike monoatomic ion sputtering, the information depth obtained with large cluster ions is typically very large (∼10 nm) and that this can be caused both by a large roughness development at early stages of the sputtering process and by a large mixing zone. As a consequence, a large deformation of the Al intensity profile is observed. Using sample rotation during profiling significantly improves the depth resolution while sample temperature has no significant effect. The determining parameter for high depth resolution still remains the total energy of the cluster instead of the energy per atom in the cluster.

Direct Imaging Mass Spectrometry of Plant Leaves Using Surface-assisted Laser Desorption/Ionization with Sputter-deposited Platinum Film.

PubMed

Ozawa, Tomoyuki; Osaka, Issey; Hamada, Satoshi; Murakami, Tatsuya; Miyazato, Akio; Kawasaki, Hideya; Arakawa, Ryuichi

2016-01-01

Plant leaves administered with systemic insecticides as agricultural chemicals were analyzed using imaging mass spectrometry (IMS). Matrix-assisted laser desorption/ionization (MALDI) is inadequate for the detection of insecticides on leaves because of the charge-up effect that occurs on the non-conductive surface of the leaves. In this study, surface-assisted laser desorption/ionization with a sputter-deposited platinum film (Pt-SALDI) was used for direct analysis of chemicals in plant leaves. Sputter-deposited platinum (Pt) films were prepared on leaves administered with the insecticides. A sputter-deposited Pt film with porous structure was used as the matrix for Pt-SALDI. Acephate and acetamiprid contained in the insecticides on the leaves could be detected using Pt-SALDI-MS, but these chemical components could not be adequately detected using MALDI-MS because of the charge-up effect. Enhancement of ion yields for the insecticides was achieved using Pt-SALDI, accompanied by prevention of the charge-up effect by the conductive Pt film. The movement of systemic insecticides in plants could be observed clearly using Pt-SALDI-IMS. The distribution and movement of components of systemic insecticides on leaves could be analyzed directly using Pt-SALDI-IMS. Additionally, changes in the properties of the chemicals with time, as an indicator of the permeability of the insecticides, could be evaluated.

Modulation of absorption manner in helicon discharges by changing profile of low axial magnetic field

NASA Astrophysics Data System (ADS)

Zhao, Gao; Wang, Yu; Niu, Chen; Liu, Zhong-Wei; Ouyang, Jiting; Chen, Qiang

2017-09-01

Not Available Project supported by the National Natural Science Foundation of China (Grant Nos. 11175024, 11375031, and 11505013), the Beijing Natural Science Foundation of China (Grant No. KZ201510015014), and the Beijing Municipal Natural Science Foundation, China (Grant No. 4162024).

Effect of sputtering atmosphere on the characteristics of ZrOx resistive switching memory

NASA Astrophysics Data System (ADS)

He, Pin; Ye, Cong; Wu, Jiaji; Wei, Wei; Wei, Xiaodi; Wang, Hao; Zhang, Rulin; Zhang, Li; Xia, Qing; Wang, Hanbin

2017-05-01

A ZrOx switching layer with different oxygen content for TiN/ZrOx/Pt resistive switching (RS) memory was prepared by magnetron sputtering in different atmospheres such as N2/Ar mixture, O2/Ar mixture as well as pure Ar. The morphology, structure and RS characteristics were systemically investigated and it was found that the RS performance is highly dependent on the sputtering atmosphere. For the memory device sputtered in N2/Ar mixture, with 8.06% nitrogen content in the ZrOx switching layer, the highest uniformity with smallest distribution of V set and high resistance states (HRS)/low resistance states (LRS) values were achieved. By analyzing the current conduction mechanisms combined with possible RS mechanisms for three devices, we deduce that for the device with a ZrOx layer sputtered in N2/Ar mixture, oxygen ions (O2-), which are decisive to the disruption/formation of the conductive filament, will gather around the tip of the filament due to the existence of doping nitrogen, and lead to the reduction of O2- migration randomness in the operation process, so that the uniformity of the N-doped ZrOx device can be improved.

Thin film characterization by laser interferometry combined with SIMS

NASA Astrophysics Data System (ADS)

Kempf, J.; Nonnenmacher, M.; Wagner, H. H.

1988-10-01

Thin film properties of technologically important materials (Si, GaAs, SiO2, WSix) have been measured by using a novel technique that combines secondary ion mass spectrometry (SIMS) and laser interferometry. The simultaneous measurement of optical phase and reflectance as well as SIMS species during ion sputtering yielded optical constants, sputtering rates and composition of thin films with high depth resolution. A model based on the principle of multiple reflection within a multilayer structure, which considered also transformation of the film composition in depth and time during sputtering, was fitted to the reflectance and phase data. This model was applied to reveal the transformation of silicon by sputtering with O{2/+} ions. Special attention was paid to the preequilibrium phase of the sputter process (amorphization, oxidation, and volume expansion). To demonstrate the analytical potential of our method the multilayer system WSix/poly-Si/SiO2/Si was investigated. The physical parameters and the stoichiometry of tungsten suicide were determined for annealed as well as deposited films. A highly sensitive technique that makes use of a Fabry-Perot etalon integrated with a Michelson type interferometer is proposed. This two-stage interferometer has the potential to profile a sample surface with subangstroem resolution.

Sputtering Holes with Ion Beamlets

NASA Technical Reports Server (NTRS)

Byers, D. C.; Banks, B. A.

1974-01-01

Ion beamlets of predetermined configurations are formed by shaped apertures in the screen grid of an ion thruster having a double grid accelerator system. A plate is placed downstream from the screen grid holes and attached to the accelerator grid. When the ion thruster is operated holes having the configuration of the beamlets formed by the screen grid are sputtered through the plate at the accelerator grid.

Application of the Physics of Wave-Particle Interactions in the Auroral Upward Current Region for Use in the VASIMR° Deep Space Electric Propulsion System

NASA Astrophysics Data System (ADS)

Bering, E. A.; Olsen, C.; Longmier, B.; Ballenger, M.; Giambusso, M.; Carter, M.; Cassady, L.; Chang Diaz, F.; Glover, T.; McCaskill, G.; Squire, J.

2011-12-01

This paper will describe the laboratory application of the lessons learned from the study of wave particle interactions in the auroral upward current region to the industrial development problem of electric spacecraft propulsion. The VAriable Specific Impulse Magnetoplasma Rocket (VASIMR°) has been developed by using the results of space plasma experiments in laboratory plasma studies that will ultimately enable further space exploration. VASIMR° is a high power electric spacecraft propulsion system, capable of Isp/thrust modulation at constant power. The VASIMR° uses a helicon discharge to generate plasma. The plasma is leaked though a strong magnetic mirror to the second stage. In this stage, this plasma is energized by an RF booster stage that uses left hand polarized slow mode waves launched from the high field side of the ion cyclotron resonance. In the experiments reported in this paper, the booster uses 0.5-0.7 MHz waves with up to 170 kW of power. The single pass ion cyclotron heating (ICH) produced a substantial increase in ion velocity. Pitch angle distribution studies showed that this increase took place in the resonance region where the ion cyclotron frequency was roughly equal to the frequency on the injected rf waves. Downstream of the resonance region the perpendicular velocity boost should be converted to axial flow velocity through the conservation of the first adiabatic invariant as the magnetic field decreases in the exhaust region of the VASIMR°. Results from high power Helicon only and Helicon with ICH experiments are presented from the VX-200 using argon propellant. A two-axis translation stage has been used to survey the spatial structure of plasma parameters, momentum flux and magnetic perturbations in the VX-200 exhaust plume. These recent measurements were made within a new 150 cubic meter cryo-pumped vacuum chamber and are presented in the context of plasma detachment. For the first time, the thruster efficiency and thrust of a high-power VASIMR° prototype have been measured with the thruster installed inside a vacuum chamber with sufficient volume and pumping to simulate the vacuum conditions of space. Using an ion flux probe array and a plasma momentum flux sensor (PMFS), the exhaust of the VX-200 engine was characterized as a function of the coupled RF power and as a function of the radial and axial position within the exhaust plume. The ionization cost of argon propellant was determined to be 87 eV for optimized values of RF power and propellant flow rate. Recent results at 200 kW coupled RF power have shown a thruster efficiency of 72% at a specific impulse of 5000 s and a thrust of 5.7 N.

System analysis of plasma centrifuges and sputtering

NASA Technical Reports Server (NTRS)

Hong, S. H.

1978-01-01

System analyses of cylindrical plasma centrifuges are presented, for which the velocity field and electromagnetic fields are calculated. The effects of different electrode geometrics, induced magnetic fields, Hall-effect, and secondary flows are discussed. It is shown that speeds of 10000 m/sec can be achieved in plasma centrifuges, and that an efficient separation of U238 and U235 in uranium plasmas is feasible. The external boundary-value problem for the deposition of sputtering products is reduced to a Fredholm integral equation, which is solved analytically by means of the method of successive approximations.

Contributions of solar-wind induced potential sputtering to the lunar surface erosion rate and it's exosphere

NASA Astrophysics Data System (ADS)

Alnussirat, S. T.; Barghouty, A. F.; Edmunson, J. E.; Sabra, M. S.; Rickman, D. L.

2018-04-01

Sputtering of lunar regolith by solar-wind protons and heavy ions with kinetic energies of about 1 keV/amu is an important erosive process that affects the lunar surface and exosphere. It plays an important role in changing the chemical composition and thickness of the surface layer, and in introducing material into the exosphere. Kinetic sputtering is well modeled and understood, but understanding of mechanisms of potential sputtering has lagged behind. In this study we differentiate the contributions of potential sputtering from the standard (kinetic) sputtering in changing the chemical composition and erosion rate of the lunar surface. Also we study the contribution of potential sputtering in developing the lunar exosphere. Our results show that potential sputtering enhances the total characteristic sputtering erosion rate by about 44%, and reduces sputtering time scales by the same amount. Potential sputtering also introduces more material into the lunar exosphere.

Development of an inductively coupled impulse sputtering source for coating deposition

NASA Astrophysics Data System (ADS)

Loch, Daniel Alexander Llewellyn

In recent years, highly ionised pulsed plasma processes have had a great impact on improving the coating performance of various applications, such as for cutting tools and ITO coatings, allowing for a longer service life and improved defect densities. These improvements stem from the higher ionisation degree of the sputtered material in these processes and with this the possibility of controlling the flux of sputtered material, allowing the regulation of the hardness and density of coatings and the ability to sputter onto complex contoured substrates. The development of Inductively Coupled Impulse Sputtering (ICIS) is aimed at the potential of utilising the advantages of highly ionised plasma for the sputtering of ferromagnetic material. In traditional magnetron based sputter processes ferromagnetic materials would shunt the magnetic field of the magnetron, thus reducing the sputter yield and ionisation efficiency. By generating the plasma within a high power pulsed radio frequency (RF) driven coil in front of the cathode, it is possible to remove the need for a magnetron by applying a high voltage pulsed direct current to the cathode attracting argon ions from the plasma to initiate sputtering. This is the first time that ICIS technology has been deployed in a sputter coating system. To study the characteristics of ICIS, current and voltage waveforms have been measured to examine the effect of increasing RF-power. Plasma analysis has been conducted by optical emission spectroscopy to investigate the excitation mechanisms and the emission intensity. These are correlated to the set RF-power by modelling assumptions based on electron collisions. Mass spectroscopy is used to measure the plasma potential and ion energy distribution function. Pure copper, titanium and nickel coatings have been deposited on silicon with high aspect ratio via to measure the deposition rate and characterise the microstructure. For titanium and nickel the emission modelling results are in good agreement with the model expectations showing that electron collisions are the main excitation mechanism. The plasma potential was measured as 20 eV, this is an ideal level for good adatom mobility with reduced lattice defects. All surfaces in the via were coated, perpendicular column growth on the sidewalls indicates a predominantly ionised metal flux to the substrate and the deposition rates agree with the literature value of the sputter yield of the materials. The results of the studies show that ICIS is a viable process for the deposition of magnetic coatings with high ionisation in the plasma.

Tailoring the soft magnetic properties of sputtered multilayers by microstructure engineering for high frequency applications

NASA Astrophysics Data System (ADS)

Falub, Claudiu V.; Rohrmann, Hartmut; Bless, Martin; Meduňa, Mojmír; Marioni, Miguel; Schneider, Daniel; Richter, Jan H.; Padrun, Marco

2017-05-01

Soft magnetic Ni78.5Fe21.5, Co91.5Ta4.5Zr4 and Fe52Co28B20 thin films laminated with SiO2, Al2O3, AlN, and Ta2O5 dielectric interlayers were deposited on 8" Si wafers using DC, pulsed DC and RF cathodes in the industrial, high-throughput Evatec LLS-EVO-II magnetron sputtering system. A typical multilayer consists of a bilayer stack up to 50 periods, with alternating (50-100) nm thick magnetic layers and (2-20) nm thick dielectric interlayers. We introduced the in-plane magnetic anisotropy in these films during sputtering by a combination of a linear magnetic field, seed layer texturing by means of linear collimators, and the oblique incidence inherent to the geometry of the sputter system. Depending on the magnetic material, the anisotropy field for these films was tuned in the range of ˜(7-120) Oe by choosing the appropriate interlayer thickness, the aspect ratios of the linear collimators in front of the targets, and the sputter process parameters (e.g. pressure, power, DC pulse frequency), while the coercivity was kept low, ˜(0.05-0.9) Oe. The alignment of the easy axis (EA) on the 8" wafers was typically between ±1.5° and ±4°. We discuss the interdependence of structure and magnetic properties in these films, as revealed by atomic force microscopy (AFM), X-ray reflectivity (XRR) with reciprocal space mapping (RSM) and magneto-optical Kerr effect (MOKE) measurements.

Effect of sputtering pressure on crystalline quality and residual stress of AlN films deposited at 823 K on nitrided sapphire substrates by pulsed DC reactive sputtering

NASA Astrophysics Data System (ADS)

Ohtsuka, Makoto; Takeuchi, Hiroto; Fukuyama, Hiroyuki

2016-05-01

Aluminum nitride (AlN) is a promising material for use in applications such as deep-ultraviolet light-emitting diodes (UV-LEDs) and surface acoustic wave (SAW) devices. In the present study, the effect of sputtering pressure on the surface morphology, crystalline quality, and residual stress of AlN films deposited at 823 K on nitrided a-plane sapphire substrates, which have high-crystalline-quality c-plane AlN thin layers, by pulsed DC reactive sputtering was investigated. The c-axis-oriented AlN films were homoepitaxially grown on nitrided sapphire substrates at sputtering pressures of 0.4-1.5 Pa. Surface damage of the AlN sputtered films increased with increasing sputtering pressure because of arcing (abnormal electrical discharge) during sputtering. The sputtering pressure affected the crystalline quality and residual stress of AlN sputtered films because of a change in the number and energy of Ar+ ions and Al sputtered atoms. The crystalline quality of AlN films was improved by deposition with lower sputtering pressure.

Plasma ``anti-assistance'' and ``self-assistance'' to high power impulse magnetron sputtering

NASA Astrophysics Data System (ADS)

Anders, André; Yushkov, Georgy Yu.

2009-04-01

A plasma assistance system was investigated with the goal to operate high power impulse magnetron sputtering (HiPIMS) at lower pressure than usual, thereby to enhance the utilization of the ballistic atoms and ions with high kinetic energy in the film growth process. Gas plasma flow from a constricted plasma source was aimed at the magnetron target. Contrary to initial expectations, such plasma assistance turned out to be contraproductive because it led to the extinction of the magnetron discharge. The effect can be explained by gas rarefaction. A better method of reducing the necessary gas pressure is operation at relatively high pulse repetition rates where the afterglow plasma of one pulse assists in the development of the next pulse. Here we show that this method, known from medium-frequency (MF) pulsed sputtering, is also very important at the much lower pulse repetition rates of HiPIMS. A minimum in the possible operational pressure is found in the frequency region between HiPIMS and MF pulsed sputtering.

RHEED oscillations in spinel ferrite epitaxial films grown by conventional planar magnetron sputtering

NASA Astrophysics Data System (ADS)

Ojima, T.; Tainosho, T.; Sharmin, S.; Yanagihara, H.

2018-04-01

Real-time in situ reflection high energy electron diffraction (RHEED) observations of Fe3O4, γ-Fe2O3, and (Co,Fe)3O4 films on MgO(001) substrates grown by a conventional planar magnetron sputtering was studied. The change in periodical intensity of the specular reflection spot in the RHEED images of three different spinel ferrite compounds grown by two different sputtering systems was examined. The oscillation period was found to correspond to the 1/4 unit cell of each spinel ferrite, similar to that observed in molecular beam epitaxy (MBE) and pulsed laser deposition (PLD) experiments. This suggests that the layer-by-layer growth of spinel ferrite (001) films is general in most physical vapor deposition (PVD) processes. The surfaces of the films were as flat as the surface of the substrate, consistent with the observed layer-by-layer growth process. The observed RHEED oscillation indicates that even a conventional sputtering method can be used to control film thickness during atomic layer depositions.

Electric Propulsion Induced Secondary Mass Spectroscopy

NASA Technical Reports Server (NTRS)

Amini, Rashied; Landis, Geoffrey

2012-01-01

A document highlights a means to complement remote spectroscopy while also providing in situ surface samples without a landed system. Historically, most compositional analysis of small body surfaces has been done remotely by analyzing reflection or nuclear spectra. However, neither provides direct measurement that can unambiguously constrain the global surface composition and most importantly, the nature of trace composition and second-phase impurities. Recently, missions such as Deep Space 1 and Dawn have utilized electric propulsion (EP) accelerated, high-energy collimated beam of Xe+ ions to propel deep space missions to their target bodies. The energies of the Xe+ are sufficient to cause sputtering interactions, which eject material from the top microns of a targeted surface. Using a mass spectrometer, the sputtered material can be determined. The sputtering properties of EP exhaust can be used to determine detailed surface composition of atmosphereless bodies by electric propulsion induced secondary mass spectroscopy (EPI-SMS). EPI-SMS operation has three high-level requirements: EP system, mass spectrometer, and altitude of about 10 km. Approximately 1 keV Xe+ has been studied and proven to generate high sputtering yields in metallic substrates. Using these yields, first-order calculations predict that EPI-SMS will yield high signal-to-noise at altitudes greater than 10 km with both electrostatic and Hall thrusters.

Carbon Back Sputter Modeling for Hall Thruster Testing

NASA Technical Reports Server (NTRS)

Gilland, James H.; Williams, George J.; Burt, Jonathan M.; Yim, John Tamin

2016-01-01

Lifetime requirements for electric propulsion devices, including Hall Effect thrusters, are continually increasing, driven in part by NASA's inclusion of this technology in it's exploration architecture. NASA will demonstrate high-power electric propulsion system on the Solar Electric Propulsion Technology Demonstration Mission (SEP TDM). The Asteroid Redirect Robotic mission is one candidate SEP TDM, which is projected to require tens of thousands of thruster life. As thruster life is increased, for example through the use of improved magnetic field designs, the relative influence of facility effects increases. One such effect is the sputtering and redeposition, or back sputter, of facility materials by the high energy thruster plumes. In support of wear testing for the Hall Effect Rocket with Magnetic Shielding (HERMeS) project, the back sputter from a Hall effect thruster plume has been modeled for the NASA Glenn Research Center's Vacuum Facility 5. The predicted wear at a near-worst case condition of 600 V, 12.5 kW was found to be on the order of 1 micron/kh in a fully carbon-lined chamber. A more detailed numerical Monte Carlo code was also modified to estimate back sputter for a detailed facility and pumping configuration. This code demonstrated similar back sputter rate distributions, but is not yet accurately modeling the magnitudes. The modeling has been benchmarked to recent HERMeS wear testing, using multiple microbalance measurements. These recent measurements have yielded values on the order of 1.5 - 2 micron/kh at 600 V and 12.5 kW.

Sputtered silicon nitride coatings for wear protection

NASA Technical Reports Server (NTRS)

Grill, A.; Aron, P. R.

1982-01-01

Silicon nitride films were deposited by RF sputtering on 304 stainless steel substrates in a planar RF sputtering apparatus. The sputtering was performed from a Si3N4 target in a sputtering atmosphere of argon and nitrogen. The rate of deposition, the composition of the coatings, the surface microhardness and the adhesion of the coatings to the substrates were investigated as a function of the process parameters, such as: substrate target distance, fraction nitrogen in the sputtering atmosphere and sputtering pressure. Silicon rich coating was obtained for fraction nitrogen below 0.2. The rate of deposition decreases continuously with increasing fraction nitrogen and decreasing sputtering pressure. It was found that the adherence of the coatings improves with decreasing sputtering pressure, almost independently of their composition.

Noncontact measurement of substrate temperature by optical low-coherence interferometry in high-power pulsed magnetron sputtering

NASA Astrophysics Data System (ADS)

Hattori, Katsuhiro; Ohta, Takayuki; Oda, Akinori; Kousaka, Hiroyuki

2018-01-01

Substrate temperature is one of the important parameters that affect the quality of deposited films. The monitoring of the substrate temperature is an important technique of controlling the deposition process precisely. In this study, the Si substrate temperature in high-power pulse magnetron sputtering (HPPMS) was measured by a noncontact method based on optical low-coherence interferometry (LCI). The measurement was simultaneously performed using an LCI system and a thermocouple (TC) as a contact measurement method. The difference in measured value between the LCI system and the TC was about 7.4 °C. The reproducibilities of measurement for the LCI system and TC were ±0.7 and ±2.0 °C, respectively. The heat influx from the plasma to the substrate was estimated using the temporal variation of substrate temperature and increased from 19.7 to 160.0 mW/cm2 with increasing target applied voltage. The major factor for the enhancement of the heat influx would be charged species such as ions and electrons owing to the high ionization degree of sputtered metal particles in HPPMS.

Analysis of surface sputtering on a quantum statistical basis

NASA Technical Reports Server (NTRS)

Wilhelm, H. E.

1975-01-01

Surface sputtering is explained theoretically by means of a 3-body sputtering mechanism involving the ion and two surface atoms of the solid. By means of quantum-statistical mechanics, a formula for the sputtering ratio S(E) is derived from first principles. The theoretical sputtering rate S(E) was found experimentally to be proportional to the square of the difference between incident ion energy and the threshold energy for sputtering of surface atoms at low ion energies. Extrapolation of the theoretical sputtering formula to larger ion energies indicates that S(E) reaches a saturation value and finally decreases at high ion energies. The theoretical sputtering ratios S(E) for wolfram, tantalum, and molybdenum are compared with the corresponding experimental sputtering curves in the low energy region from threshold sputtering energy to 120 eV above the respective threshold energy. Theory and experiment are shown to be in good agreement.

Growth of oxide exchange bias layers

DOEpatents

Chaiken, Alison; Michel, Richard P.

1998-01-01

An oxide (NiO, CoO, NiCoO) antiferromagnetic exchange bias layer produced by ion beam sputtering of an oxide target in pure argon (Ar) sputtering gas, with no oxygen gas introduced into the system. Antiferromagnetic oxide layers are used, for example, in magnetoresistive readback heads to shift the hysteresis loops of ferromagnetic films away from the zero field axis. For example, NiO exchange bia layers have been fabricated using ion beam sputtering of an NiO target using Ar ions, with the substrate temperature at 200.degree. C., the ion beam voltage at 1000V and the beam current at 20 mA, with a deposition rate of about 0.2 .ANG./sec. The resulting NiO film was amorphous.

Structural, magnetic and magnetocaloric properties of sputtered Gd films

NASA Astrophysics Data System (ADS)

Kumar, N. Pavan; Shaleni, V.; Satyanarayana, L.; Manorama, S. V.; Raja, M. Manivel

2018-05-01

Gd films with different thicknesses varying from 100 nm to 750 nm have been deposited on single crystal Si (100) substrate by ultra high vacuum magnetron sputtering system. X-ray diffraction analysis reveals the crystalline nature and hcp crystal structure of the films. Microstructure investigations have been carried to study the surface morphology of the films. Thermo magnetic studies confirm the magnetic transition of the films and are ˜275 K, close to bulk. Magnetocaloric effect (MCE) has been studied from magnetic isotherms measured around magnetic transition and the maximum isothermal entropy change of 2.0 J/kg-K is achieved for a magnetic field change of 2 T for the 750 nm film. The sputtered Gd films are useful for micro cooling device applications.

Growth of oxide exchange bias layers

DOEpatents

Chaiken, A.; Michel, R.P.

1998-07-21

An oxide (NiO, CoO, NiCoO) antiferromagnetic exchange bias layer produced by ion beam sputtering of an oxide target in pure argon (Ar) sputtering gas, with no oxygen gas introduced into the system. Antiferromagnetic oxide layers are used, for example, in magnetoresistive readback heads to shift the hysteresis loops of ferromagnetic films away from the zero field axis. For example, NiO exchange bias layers have been fabricated using ion beam sputtering of an NiO target using Ar ions, with the substrate temperature at 200 C, the ion beam voltage at 1000V and the beam current at 20 mA, with a deposition rate of about 0.2 {angstrom}/sec. The resulting NiO film was amorphous. 4 figs.

Quantitative comparisons between experimentally measured 2D carbon radiation and Monte Carlo impurity (MCI) code simulations

NASA Astrophysics Data System (ADS)

Evans, T. E.; Finkenthal, D. F.; Fenstermacher, M. E.; Leonard, A. W.; Porter, G. D.; West, W. P.

Experimentally measured carbon line emissions and total radiated power distributions from the DIII-D divertor and scrape-off layer (SOL) are compared to those calculated with the Monte Carlo impurity (MCI) model. A UEDGE [T.D. Rognlien et al., J. Nucl. Mater. 196-198 (1992) 347] background plasma is used in MCI with the Roth and Garcia-Rosales (RG-R) chemical sputtering model [J. Roth, C. García-Rosales, Nucl. Fusion 36 (1992) 196] and/or one of six physical sputtering models. While results from these simulations do not reproduce all of the features seen in the experimentally measured radiation patterns, the total radiated power calculated in MCI is in relatively good agreement with that measured by the DIII-D bolometric system when the Smith78 [D.L. Smith, J. Nucl. Mater. 75 (1978) 20] physical sputtering model is coupled to RG-R chemical sputtering in an unaltered UEDGE plasma. Alternatively, MCI simulations done with UEDGE background ion temperatures along the divertor target plates adjusted to better match those measured in the experiment resulted in three physical sputtering models which when coupled to the RG-R model gave a total radiated power that was within 10% of measured value.

Magnetron sputtering source

DOEpatents

Makowiecki, Daniel M.; McKernan, Mark A.; Grabner, R. Fred; Ramsey, Philip B.

1994-01-01

A magnetron sputtering source for sputtering coating substrates includes a high thermal conductivity electrically insulating ceramic and magnetically attached sputter target which can eliminate vacuum sealing and direct fluid cooling of the cathode assembly. The magnetron sputtering source design results in greater compactness, improved operating characteristics, greater versatility, and low fabrication cost. The design easily retrofits most sputtering apparatuses and provides for safe, easy, and cost effective target replacement, installation, and removal.

Fabrication of Nanoscaled Systems

DTIC Science & Technology

2007-05-01

corresponds to an effective dose as low as a few ýC/cm2 for sputtering of a 50 rum resist film. Comparison to observed sputtering rates in other polymeric ...materials (e.g. polystyrene and AZ and SU8 resists), coupled with time of flight SIMS measurements indicate that the relevant mechanism is indeed ion...approximately unity between GMR substrate and resist (for both electron and ion exposed HSQ), which we would not expect to be attainable using polymeric

MEMS Gate Structures for Electric Propulsion Applications

DTIC Science & Technology

2006-07-12

distance between gates of dual gate system V = grid voltage Dsheath = sheath thickness Va = anode voltage E = electric field Vemitter = emitter voltage Es...minutes. A hot pressed boron nitride target (4N) in the hexagonal phase (h- BN) was sputtered in a RF magnetron sputtering gun. To promote the nucleation...and nanoFETs. This paper concludes with a discussion on using MEMS gates for dual -grid electron field emission applications. II. Gate Design I I

Sputtering of Lunar Regolith by Solar Wind Protons and Heavy Ions, and General Aspects of Potential Sputtering

NASA Technical Reports Server (NTRS)

Alnussirat, S. T.; Sabra, M. S.; Barghouty, A. F.; Rickman, Douglas L.; Meyer, F.

2014-01-01

New simulation results for the sputtering of lunar soil surface by solar-wind protons and heavy ions will be presented. Previous simulation results showed that the sputtering process has significant effects and plays an important role in changing the surface chemical composition, setting the erosion rate and the sputtering process timescale. In this new work and in light of recent data, we briefly present some theoretical models which have been developed to describe the sputtering process and compare their results with recent calculation to investigate and differentiate the roles and the contributions of potential (or electrodynamic) sputtering from the standard (or kinetic) sputtering.

Estimates of Sputter Yields of Solar-Wind Heavy Ions of Lunar Regolith Materials

NASA Technical Reports Server (NTRS)

Barghouty, Abdulmasser F.; Adams, James H., Jr.

2008-01-01

At energies of approximately 1 keV/amu, solar-wind protons and heavy ions interact with the lunar surface materials via a number of microscopic interactions that include sputtering. Solar-wind induced sputtering is a main mechanism by which the composition of the topmost layers of the lunar surface can change, dynamically and preferentially. This work concentrates on sputtering induced by solar-wind heavy ions. Sputtering associated with slow (speeds the electrons speed in its first Bohr orbit) and highly charged ions are known to include both kinetic and potential sputtering. Potential sputtering enjoys some unique characteristics that makes it of special interest to lunar science and exploration. Unlike the yield from kinetic sputtering where simulation and approximation schemes exist, the yield from potential sputtering is not as easy to estimate. This work will present a preliminary numerical scheme designed to estimate potential sputtering yields from reactions relevant to this aspect of solar-wind lunar-surface coupling.

The HelCat basic plasma science device

NASA Astrophysics Data System (ADS)

Gilmore, M.; Lynn, A. G.; Desjardins, T. R.; Zhang, Y.; Watts, C.; Hsu, S. C.; Betts, S.; Kelly, R.; Schamiloglu, E.

2015-01-01

The Helicon-Cathode(HelCat) device is a medium-size linear experiment suitable for a wide range of basic plasma science experiments in areas such as electrostatic turbulence and transport, magnetic relaxation, and high power microwave (HPM)-plasma interactions. The HelCat device is based on dual plasma sources located at opposite ends of the 4 m long vacuum chamber - an RF helicon source at one end and a thermionic cathode at the other. Thirteen coils provide an axial magnetic field B >= 0.220 T that can be configured individually to give various magnetic configurations (e.g. solenoid, mirror, cusp). Additional plasma sources, such as a compact coaxial plasma gun, are also utilized in some experiments, and can be located either along the chamber for perpendicular (to the background magnetic field) plasma injection, or at one of the ends for parallel injection. Using the multiple plasma sources, a wide range of plasma parameters can be obtained. Here, the HelCat device is described in detail and some examples of results from previous and ongoing experiments are given. Additionally, examples of planned experiments and device modifications are also discussed.

Effect of plasma distribution on propulsion performance in electrodeless plasma thrusters

NASA Astrophysics Data System (ADS)

Takao, Yoshinori; Takase, Kazuki; Takahashi, Kazunori

2016-09-01

A helicon plasma thruster consisting of a helicon plasma source and a magnetic nozzle is one of the candidates for long-lifetime thrusters because no electrodes are employed to generate or accelerate plasma. A recent experiment, however, detected the non-negligible axial momentum lost to the lateral wall boundary, which degrades thruster performance, when the source was operated with highly ionized gases. To investigate this mechanism, we have conducted two-dimensional axisymmetric particle-in-cell (PIC) simulations with the neutral distribution obtained by Direct Simulation Monte Carlo (DSMC) method. The numerical results have indicated that the axially asymmetric profiles of the plasma density and potential are obtained when the strong decay of neutrals occurs at the source downstream. This asymmetric potential profile leads to the accelerated ion towards the lateral wall, leading to the non-negligible net axial force in the opposite direction of the thrust. Hence, to reduce this asymmetric profile by increasing the neutral density at downstream and/or by confining plasma with external magnetic field would result in improvement of the propulsion performance. These effects are also analyzed by PIC/DSMC simulations.

Scaling of the VASIMR thruster first stage operation

NASA Astrophysics Data System (ADS)

Molvig, Kim; Batishchev, Oleg

2002-11-01

An effective helicon plasma source [1,2] is used in the variable high specific impulse VASIMR plasma thruster [3]. Experimental prototypes - VX-3 and recently up-scaled VX-10 [4] configurations operate with hydrogen, deuterium and helium plasmas. A set of models [5-7] has been developed to study VASIMR light gases helicon discharge. Using zero-dimensional model incorporating energy and mass balance equations we study scaling of the plasma source efficiency with the increased mass flow rate, applied electrical power and dimensions of the quartz tube. We compare theoretical results with existing experimental data. [1] M.A.Lieberman, A.J.Lihtenberg, 'Principles of ..', Wiley, 1994; [2] F.F.Chen, Plas. Phys. Contr. Fus. 33, 339, 1991; [3] F.Chang-Diaz et al, Bull. APS 45 (7) 129, 2000; [4] J.Squire et al., Bull. APS 45 (7) 130, 2000; [5] O.Batishchev, K.Molvig, AIAA technical paper 2000-3754, 2001; [6] O.Batishchev, K.Molvig, IEPC-01-208 paper, 27th Int. Electrical Propulsion Conf., 2001; [7] O.Batishchev, K.Molvig, AIAA technical paper 2002-0347, 2002.

Enhancement of axial momentum lost to the radial wall by the upstream magnetic field in a helicon source

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Ando, Akira

2017-05-01

Individual measurements of forces exerted to an upstream back wall, a radial source wall, and a magnetic field of a helicon plasma thruster, which has two solenoids upstream and downstream of a radiofrequency antenna, are precisely measured. Two different structures of magnetic field lines in the source are tested, where the solenoid current is supplied to either only the downstream solenoid or to both the solenoids. It is observed that the high density plasma exists upstream of the rf antenna when both the solenoids are powered, while the maximum density exists near the rf antenna when only the downstream solenoid is powered. Although the force exerted to the back wall is increased for the two solenoids case, the axial momentum lost to the radial wall is simultaneously enhanced; then the total force exerted to the whole structure of the thruster is found to be very similar for the two magnetic field configurations. It is shown that the individual force measurement provides useful information on the plasma momentum interacting with the physical boundaries and the magnetic fields.

Atomic and molecular hydrogen gas temperatures in a low-pressure helicon plasma

NASA Astrophysics Data System (ADS)

Samuell, Cameron M.; Corr, Cormac S.

2015-08-01

Neutral gas temperatures in hydrogen plasmas are important for experimental and modelling efforts in fusion technology, plasma processing, and surface modification applications. To provide values relevant to these application areas, neutral gas temperatures were measured in a low pressure (< 10 mTorr) radiofrequency helicon discharge using spectroscopic techniques. The atomic and molecular species were not found to be in thermal equilibrium with the atomic temperature being mostly larger then the molecular temperature. In low power operation (< 1 kW), the molecular hydrogen temperature was observed to be linearly proportional to the pressure while the atomic hydrogen temperature was inversely proportional. Both temperatures were observed to rise linearly with input power. For high power operation (5-20 kW), the molecular temperature was found to rise with both power and pressure up to a maximum of approximately 1200 K. Spatially resolved measurements near a graphite target demonstrated localised cooling near the sample surface. The temporal evolution of the molecular gas temperature during a high power 1.1 ms plasma pulse was also investigated and found to vary considerably as a function of pressure.

Direct measurements of classical and enhanced gradient-aligned cross-field ion flows in a helicon plasma source using laser-induced fluorescence

DOE Office of Scientific and Technical Information (OSTI.GOV)

Siddiqui, M. Umair, E-mail: musiddiqui@mail.wvu.edu; Thompson, Derek S.; McIlvain, Julianne M.

2015-12-15

Direct laser induced fluorescence measurements are shown of cross-field ion flows normal to an absorbing boundary that is aligned parallel to the axial magnetic field in a helicon plasma. We show Langmuir and emissive probe measurements of local density and plasma potential in the same region, as well as floating probe spectra near the boundary. With these measurements, we investigate the influence of ion-neutral collisionality on radial ion transport by varying the ratio of the ion gyro-radius, ρ{sub i}, to the ion-neutral collision length, λ, over the range 0.34 ≤ ρ{sub i}λ{sup −1} ≤ 1.60. Classical drift-diffusion transport along density and potential gradients ismore » sufficient to describe flow profiles for most cases. For two parameter regimes (ρ{sub i}λ{sup −1} = 0.65 and 0.44), low-frequency electrostatic fluctuations (f < 10 kHz) and enhanced cross-field bulk ion flow to the boundary are observed.« less

Waves generated in the plasma plume of helicon magnetic nozzle

DOE Office of Scientific and Technical Information (OSTI.GOV)

Singh, Nagendra; Rao, Sathyanarayan; Ranganath, Praveen

2013-03-15

Experimental measurements have shown that the plasma plume created in a helicon plasma device contains a conical structure in the plasma density and a U-shaped double layer (US-DL) tightly confined near the throat where plasma begins to expand from the source. Recently reported two-dimensional particle-in-cell simulations verified these density and US-DL features of the plasma plume. Simulations also showed that the plasma in the plume develops non-thermal feature consisting of radial ion beams with large densities near the conical surface of the density structure. The plasma waves that are generated by the radial ion beams affecting the structure of themore » plasma plume are studied here. We find that most intense waves persist in the high-density regions of the conical density structure, where the transversely accelerated ions in the radial electric fields in the plume are reflected setting up counter-streaming. The waves generated are primarily ion Bernstein modes. The nonlinear evolution of the waves leads to magnetic field-aligned striations in the fields and the plasma near the conical surface of the density structure.« less

Transport of a helicon plasma by a convergent magnetic field for high speed and compact plasma etching

NASA Astrophysics Data System (ADS)

Takahashi, Kazunori; Motomura, Taisei; Ando, Akira; Kasashima, Yuji; Kikunaga, Kazuya; Uesugi, Fumihiko; Hara, Shiro

2014-10-01

A high density argon plasma produced in a compact helicon source is transported by a convergent magnetic field to the central region of a substrate located downstream of the source. The magnetic field converging near the source exit is applied by a solenoid and further converged by installing a permanent magnet (PM) behind the substrate, which is located downstream of the source exit. Then a higher plasma density above 5 × 1012 cm-3 can be obtained in 0.2 Pa argon near the substrate, compared with the case without the PM. As no noticeable changes in the radially integrated density near the substrate and the power transfer efficiency are detected when testing the source with and without the PM, it can be deduced that the convergent field provided by the PM plays a role in constricting the plasma rather than in improving the plasma production. Furthermore it is applied to physical ion etching of silicon and aluminum substrates; then high etching rates of 6.5 µm min-1 and 8 µm min-1 are obtained, respectively.

Study of oxygen/tetraethoxysilane plasmas in a helicon reactor using optical emission spectroscopy and mass spectrometry

NASA Astrophysics Data System (ADS)

Aumaille, K.; Granier, A.; Schmidt, M.; Grolleau, B.; Vallée, C.; Turban, G.

2000-08-01

Oxygen/tetraethoxysilane (O2/TEOS) plasmas created in a low-pressure (2 mTorr) rf helicon reactor have been studied by optical emission spectroscopy and mass spectrometry as a function of the rf (13.56 MHz) power injected into the plasma, which is varied from 25 to 300 W. Complementary measurements for the interpretation of the mass spectrometric data have also been carried out using the threshold ionization mass spectrometry technique. It is shown that valuable information on the parent molecules is obtained by both optical emission spectroscopy and threshold ionization mass spectrometry techniques. At low rf power TEOS molecules and organic compounds like hydrocarbons (CH4, C2H2) and alcohols (CH3CH2OH) as well as H2, H2O, CO, O2, CO2 are observed. At high rf power TEOS and O2 molecules are totally or mostly depleted, the share of hydrocarbons decreases and carbon monoxide, carbon dioxide, water and hydrogen become the essential parts of the gas phase.

Experimental investigation of differential confinement effects in a rotating helicon plasma

NASA Astrophysics Data System (ADS)

Gueroult, Renaud; Evans, Eugene; Zweben, Stewart J.; Fisch, Nathaniel J.; Levinton, Fred

2014-10-01

Although plasmas have long been considered for isotope separation, challenges presented by nuclear waste remediation and nuclear spent fuel reprocessing have recently sparked a renewed interest for high-throughput plasma based mass separation techniques. Different filter concepts relying on rotating plasmas have been proposed to address these needs. However, one of the challenges common to these concepts is the need to control the plasma rotation profile, which is generally assumed to be provided by means of dedicated electrodes. An experimental effort aiming to evaluate the practicality of these plasma filter concepts has recently been started at PPPL. For this purpose, a linear helicon plasma source is used in combination with concentric ring electrodes. Preliminary biasing experiments results indicate floating potential profiles locally suitable for mass discrimination for different gas mixtures (Ar/Ne, Ar/N2, Ar/Kr). Radially resolved spectroscopic measurements and neutral gas composition analysis at two different axial positions are being planned to assess the mass separation effect. Work supported by US DOE under Contract No. DE-AC02-09CH11466.

An experimental investigation of alternative propellants for the helicon double layer thruster

NASA Astrophysics Data System (ADS)

Charles, C.; Boswell, R. W.; Laine, R.; MacLellan, P.

2008-09-01

Ion energy distribution functions are measured using a retarding field energy analyser located 7.5 cm downstream of a helicon double layer plasma source, respectively, operating with four molecular gases: nitrogen (N2), methane (CH4), ammonia (NH3) and nitrous oxide (N2O). For radiofrequency powers of a few hundred watts, and a magnetic field diverging from about 0.013 T (130 G) in the source to about 0.001 T (10 G) in the exhaust, an ion beam is detected for each propellant over a very similar operating pressure range (~0.023 Pa (0.17 mTorr) to ~0.267 Pa (2 mTorr)), as a result of spontaneous electric double layer formation near the exit of the plasma source. The characteristics of the ion beam versus operating pressure closely follow those previously obtained in argon, xenon and hydrogen. The ion beam exhaust velocity in space is found to be in the 17-19 km s-1 range in N2, 21-27 km s-1 range in CH4 and NH3 and 14-16 km s-1 range in N2O.

Magnetron sputtering source

DOEpatents

Makowiecki, D.M.; McKernan, M.A.; Grabner, R.F.; Ramsey, P.B.

1994-08-02

A magnetron sputtering source for sputtering coating substrates includes a high thermal conductivity electrically insulating ceramic and magnetically attached sputter target which can eliminate vacuum sealing and direct fluid cooling of the cathode assembly. The magnetron sputtering source design results in greater compactness, improved operating characteristics, greater versatility, and low fabrication cost. The design easily retrofits most sputtering apparatuses and provides for safe, easy, and cost effective target replacement, installation, and removal. 12 figs.

Sputtering and ion plating

NASA Technical Reports Server (NTRS)

1972-01-01

The proceedings of a conference on sputtering and ion plating are presented. Subjects discussed are: (1) concepts and applications of ion plating, (2) sputtering for deposition of solid film lubricants, (3) commercial ion plating equipment, (4) industrial potential for ion plating and sputtering, and (5) fundamentals of RF and DC sputtering.

Simultaneous ion sputter polishing and deposition

NASA Technical Reports Server (NTRS)

Rutledge, S.; Banks, B.; Brdar, M.

1981-01-01

Results of experiments to study ion beam sputter polishing in conjunction with simultaneous deposition as a mean of polishing copper surfaces are presented. Two types of simultaneous ion sputter polishing and deposition were used in these experiments. The first type utilized sputter polishing simultaneous with vapor deposition, and the second type utilized sputter polishing simultaneous with sputter deposition. The etch and deposition rates of both techniques were studied, as well as the surface morphology and surface roughness.

Anomalous effects in the aluminum oxide sputtering yield

NASA Astrophysics Data System (ADS)

Schelfhout, R.; Strijckmans, K.; Depla, D.

2018-04-01

The sputtering yield of aluminum oxide during reactive magnetron sputtering has been quantified by a new and fast method. The method is based on the meticulous determination of the reactive gas consumption during reactive DC magnetron sputtering and has been deployed to determine the sputtering yield of aluminum oxide. The accuracy of the proposed method is demonstrated by comparing its results to the common weight loss method excluding secondary effects such as redeposition. Both methods exhibit a decrease in sputtering yield with increasing discharge current. This feature of the aluminum oxide sputtering yield is described for the first time. It resembles the discrepancy between published high sputtering yield values determined by low current ion beams and the low deposition rate in the poisoned mode during reactive magnetron sputtering. Moreover, the usefulness of the new method arises from its time-resolved capabilities. The evolution of the alumina sputtering yield can now be measured up to a resolution of seconds. This reveals the complex dynamical behavior of the sputtering yield. A plausible explanation of the observed anomalies seems to originate from the balance between retention and out-diffusion of implanted gas atoms, while other possible causes are commented.

Large-area, continuous and high electrical performances of bilayer to few layers MoS2 fabricated by RF sputtering via post-deposition annealing method

PubMed Central

Hussain, Sajjad; Singh, Jai; Vikraman, Dhanasekaran; Singh, Arun Kumar; Iqbal, Muhammad Zahir; Khan, Muhammad Farooq; Kumar, Pushpendra; Choi, Dong-Chul; Song, Wooseok; An, Ki-Seok; Eom, Jonghwa; Lee, Wan-Gyu; Jung, Jongwan

2016-01-01

We report a simple and mass-scalable approach for thin MoS2 films via RF sputtering combined with the post-deposition annealing process. We have prepared as-sputtered film using a MoS2 target in the sputtering system. The as-sputtered film was subjected to post-deposition annealing to improve crystalline quality at 700 °C in a sulfur and argon environment. The analysis confirmed the growth of continuous bilayer to few-layer MoS2 film. The mobility value of ~29 cm2/Vs and current on/off ratio on the order of ~104 were obtained for bilayer MoS2. The mobility increased up to ~173–181 cm2/Vs, respectively, for few-layer MoS2. The mobility of our bilayer MoS2 FETs is larger than any previously reported values of single to bilayer MoS2 grown on SiO2/Si substrate with a SiO2 gate oxide. Moreover, our few-layer MoS2 FETs exhibited the highest mobility value ever reported for any MoS2 FETs with a SiO2 gate oxide. It is presumed that the high mobility behavior of our film could be attributed to low charged impurities of our film and dielectric screening effect by an interfacial MoOxSiy layer. The combined preparation route of RF sputtering and post-deposition annealing process opens up the novel possibility of mass and batch production of MoS2 film. PMID:27492282

Metal-Coated Cenospheres Obtained via Magnetron Sputter Coating: A New Precursor for Syntactic Foams

NASA Astrophysics Data System (ADS)

Shishkin, A.; Hussainova, I.; Kozlov, V.; Lisnanskis, M.; Leroy, P.; Lehmhus, D.

2018-05-01

Syntactic foams (SFs) and metal matrix syntactic foams (MMSFs) represent an advanced type of metal matrix composites (MMCs) based on hollow microspheres as particulate reinforcement. In general, SF and MMSFs allow tailoring of properties through choice of matrix, reinforcement, and volume fraction of the latter. A further handle for property adjustment is surface modification of the reinforcing particles. The present study introduces cenospheres for use as filler material in SF and MMSFs and as lightweight filler with electromagnetic interference shielding properties in civil engineering, which have been surface coated by means of physical vapor deposition, namely vibration-assisted sputter coating using a magnetron sputtering system. Altogether four types of such cenosphere-based composite powders (CPs) with an original particle size range of 50-125 µm (average particle size d50 75 µm) were studied. Surface films deposited on these were composed of Cu, stainless steel, Ti, and Ti-TiN double layers. For Cu coatings, the deposited metal film thickness was shown to be dependent on the sputtering energy. Scanning electron microscope backscattering images revealed nonporous films uniform in thickness directly after sputtering. Film thickness varied between 0.15 µm and 2.5 µm, depending on coating material and sputtering parameters. From these materials, samples were produced without addition of metal powders, exhibiting metal contents as low as 8-10 wt.% based on the coating alone. Obtained samples had an apparent density of 1.1-1.9 g/cm3 and compressive strengths ranging from 22 MPa to 135 MPa.

Boron carbide coatings for neutron detection probed by x-rays, ions, and neutrons to determine thin film quality

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nowak, G., E-mail: Gregor.Nowak@hzg.de; Störmer, M.; Horstmann, C.

2015-01-21

Due to the present shortage of {sup 3}He and the associated tremendous increase of its price, the supply of large neutron detection systems with {sup 3}He becomes unaffordable. Alternative neutron detection concepts, therefore, have been invented based on solid {sup 10}B converters. These concepts require development in thin film deposition technique regarding high adhesion, thickness uniformity and chemical purity of the converter coating on large area substrates. We report on the sputter deposition of highly uniform large-area {sup 10}B{sub 4}C coatings of up to 2 μm thickness with a thickness deviation below 4% using the Helmholtz-Zentrum Geesthacht large area sputtering system.more » The {sup 10}B{sub 4}C coatings are x-ray amorphous and highly adhesive to the substrate. Material analysis by means of X-ray-Photoelectron Spectroscopy, Secondary-Ion-Mass-Spectrometry, and Rutherford-Back-Scattering (RBS) revealed low impurities concentration in the coatings. The isotope composition determined by Secondary-Ion-Mass-Spectrometry, RBS, and inelastic nuclear reaction analysis of the converter coatings evidences almost identical {sup 10}B isotope contents in the sputter target and in the deposited coating. Neutron conversion and detection test measurements with variable irradiation geometry of the converter coating demonstrate an average relative quantum efficiency ranging from 65% to 90% for cold neutrons as compared to a black {sup 3}He-monitor. Thus, these converter coatings contribute to the development of {sup 3}He-free prototype detectors based on neutron grazing incidence. Transferring the developed coating process to an industrial scale sputtering system can make alternative {sup 3}He-free converter elements available for large area neutron detection systems.« less

Boron carbide coatings for neutron detection probed by x-rays, ions, and neutrons to determine thin film quality

NASA Astrophysics Data System (ADS)

Nowak, G.; Störmer, M.; Becker, H.-W.; Horstmann, C.; Kampmann, R.; Höche, D.; Haese-Seiller, M.; Moulin, J.-F.; Pomm, M.; Randau, C.; Lorenz, U.; Hall-Wilton, R.; Müller, M.; Schreyer, A.

2015-01-01

Due to the present shortage of 3He and the associated tremendous increase of its price, the supply of large neutron detection systems with 3He becomes unaffordable. Alternative neutron detection concepts, therefore, have been invented based on solid 10B converters. These concepts require development in thin film deposition technique regarding high adhesion, thickness uniformity and chemical purity of the converter coating on large area substrates. We report on the sputter deposition of highly uniform large-area 10B4C coatings of up to 2 μm thickness with a thickness deviation below 4% using the Helmholtz-Zentrum Geesthacht large area sputtering system. The 10B4C coatings are x-ray amorphous and highly adhesive to the substrate. Material analysis by means of X-ray-Photoelectron Spectroscopy, Secondary-Ion-Mass-Spectrometry, and Rutherford-Back-Scattering (RBS) revealed low impurities concentration in the coatings. The isotope composition determined by Secondary-Ion-Mass-Spectrometry, RBS, and inelastic nuclear reaction analysis of the converter coatings evidences almost identical 10B isotope contents in the sputter target and in the deposited coating. Neutron conversion and detection test measurements with variable irradiation geometry of the converter coating demonstrate an average relative quantum efficiency ranging from 65% to 90% for cold neutrons as compared to a black 3He-monitor. Thus, these converter coatings contribute to the development of 3He-free prototype detectors based on neutron grazing incidence. Transferring the developed coating process to an industrial scale sputtering system can make alternative 3He-free converter elements available for large area neutron detection systems.

Method for sputtering a PIN amorphous silicon semi-conductor device having partially crystallized P and N-layers

DOEpatents

Moustakas, Theodore D.; Maruska, H. Paul

1985-07-09

A high efficiency amorphous silicon PIN semiconductor device having partially crystallized (microcrystalline) P and N layers is constructed by the sequential sputtering of N, I and P layers and at least one semi-transparent ohmic electrode. The method of construction produces a PIN device, exhibiting enhanced electrical and optical properties, improved physical integrity, and facilitates the preparation in a singular vacuum system and vacuum pump down procedure.

Characterization of chemical sputtering using the Mark II DiMES porous plug injector in attached and semi-detached divertor plasmas of DIII-D

NASA Astrophysics Data System (ADS)

McLean, A. G.; Davis, J. W.; Stangeby, P. C.; Allen, S. L.; Boedo, J. A.; Bray, B. D.; Brezinsek, S.; Brooks, N. H.; Fenstermacher, M. E.; Groth, M.; Haasz, A. A.; Hollmann, E. M.; Isler, R. C.; Lasnier, C. J.; Mu, Y.; Petrie, T. W.; Rudakov, D. L.; Watkins, J. G.; West, W. P.; Whyte, D. G.; Wong, C. P. C.

2009-06-01

An improved, self-contained gas injection system for the divertor material evaluation system (DiMES) on DIII-D has been employed for in situ study of chemical erosion in the tokamak divertor environment. To minimize perturbation to local plasma, the Mark II porous plug injector (PPI) releases methane through a porous graphite surface at the outer strike point at a rate precisely controlled by a micro-orifice flow restrictor to be approximately equal as that predicted for intrinsic chemical sputtering. Effective photon efficiencies resulting from CH 4 are found to be 58 ± 12 in an attached divertor ( ne ˜ 1.5 × 10 13/cm 3, Te ˜ 25 eV, Tsurf ˜ 450 K), and 94 ± 20 in a semi-detached cold divertor ( ne ˜ 6.0 × 10 13/cm 3, Te ˜ 2-3 eV, Tsurf ˜ 350 K). These values are significantly more than previous measurements in similar plasma conditions, indicating the importance of the injection rate and local re-erosion for the integrity of this analysis. The contribution of chemical versus physical sputtering to the source of C + at the target is assessed through simultaneous measurement of CII line, and CD plus CH-band emissions during release of CH 4 from the PPI, then compared with that seen in intrinsic sputtering.

Molecular dynamics simulations of sputtering of Langmuir-Blodgett multilayers by keV C60 projectiles

PubMed Central

Paruch, R.; Rzeznik, L.; Czerwinski, B.; Garrison, B. J.; Winograd, N.; Postawa, Z.

2009-01-01

Coarse-grained molecular dynamics computer simulations are applied to investigate fundamental processes induced by an impact of keV C60 projectile at an organic overlayer composed of long, well-organized linear molecules. The energy transfer pathways, sputtering yields, and the damage induced in the irradiated system, represented by a Langmuir-Blodgett (LB) multilayers composed from molecules of bariated arachidic acid, are investigated as a function of the kinetic energy and impact angle of the projectile and the thickness of the organic system. In particular, the unique challenges of depth profiling through a LB film vs. a more isotropic solid are discussed. The results indicate that the trajectories of projectile fragments and, consequently, the primary energy can be channeled by the geometrical structure of the overlayer. Although, a similar process is known from sputtering of single crystals by atomic projectiles, it has not been anticipated to occur during C60 bombardment due to the large size of the projectile. An open and ordered molecular structure of LB films is responsible for such behavior. Both the extent of damage and the efficiency of sputtering depend on the kinetic energy, the impact angle, and the layer thickness. The results indicate that the best depth profiling conditions can be achieved with low-energy cluster projectiles irradiating the organic overlayer at large off-normal angles. PMID:20174461

[Effects of magnetron sputtered ZrN on the bonding strength of titanium porcelain].

PubMed

Zhou, Shu; Zhang, Wen-yan; Guang, Han-bing; Xia, Yang; Zhang, Fei-min

2009-04-01

To investigate the effect of magnetron sputtered ZrN on the bonding strength between a low-fusing porcelain (Ti/Vita titankeramik system) and commercially pure cast titanium. Sixteen specimens were randomly assigned to test group and control group (n=8). The control group received no surface treated. Magnetron sputtered ZrN film was deposited on the surface of specimens in the test group. Then the sixteen titanium-porcelain specimens were prepared in a rectangular shape and went through three-point bending test on a universal test machine. The bond strength of Ti/porcelain was recorded. The phase composition of the specimens was analyzed using X-ray diffraction (XRD). The interface at titanium and porcelain and the titanium surface after debonding were observed with a scanning electron microscopy (SEM) and analyzed using energy depressive spectrum (EDS). New phase of ZrN was found with XRD in the test group. Statistical analysis showed higher bond strength following ZrN surface treatment in the test group [(45.991+/-0.648) MPa] than that in the control group [(29.483+/-1.007) MPa] (P=0.000). Bonded ceramic could be observed in test group, the amount of bonded ceramic was more than that in the control group. No obvious bonded ceramic in control group was found. Magnetron sputtered ZrN can improve bond strength of Ti/Vita titankeramik system significantly.

Solar-Wind Protons and Heavy Ions Sputtering of Lunar Surface Materials

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barghouty, N.; Meyer, Fred W; Harris, Peter R

2011-01-01

Lunar surface materials are exposed to {approx}1 keV/amu solar-wind protons and heavy ions on almost continuous basis. As the lunar surface consists of mostly oxides, these materials suffer, in principle, both kinetic and potential sputtering due to the actions of the solar-wind ions. Sputtering is an important mechanism affecting the composition of both the lunar surface and its tenuous exosphere. While the contribution of kinetic sputtering to the changes in the composition of the surface layer of these oxides is well understood and modeled, the role and implications of potential sputtering remain unclear. As new potential-sputtering data from multi-charged ionsmore » impacting lunar regolith simulants are becoming available from Oak Ridge National Laboratory's MIRF, we examine the role and possible implications of potential sputtering of Lunar KREEP soil. Using a non-equilibrium model we demonstrate that solar-wind heavy ions induced sputtering is critical in establishing the timescale of the overall solar-wind sputtering process of the lunar surface. We also show that potential sputtering leads to a more pronounced and significant differentiation between depleted and enriched surface elements. We briefly discuss the impacts of enhanced sputtering on the composition of the regolith and the exosphere, as well as of solar-wind sputtering as a source of hydrogen and water on the moon.« less

Kinetic and Potential Sputtering of Lunar Regolith: Contribution of Solar-Wind Heavy Ions

NASA Technical Reports Server (NTRS)

Meyer, F. W.; Harris, P. R.; Meyer, H. M., III; Hijiazi, H.; Barghouty, A. F.

2013-01-01

Sputtering of lunar regolith by protons as well as solar-wind heavy ions is considered. From preliminary measurements of H+, Ar+1, Ar+6 and Ar+9 ion sputtering of JSC-1A AGGL lunar regolith simulant at solar wind velocities, and TRIM simulations of kinetic sputtering yields, the relative contributions of kinetic and potential sputtering contributions are estimated. An 80-fold enhancement of oxygen sputtering by Ar+ over same-velocity H+, and an additional x2 increase for Ar+9 over same-velocity Ar+ was measured. This enhancement persisted to the maximum fluences investigated is approximately 1016/cm (exp2). Modeling studies including the enhanced oxygen ejection by potential sputtering due to the minority heavy ion multicharged ion solar wind component, and the kinetic sputtering contribution of all solar wind constituents, as determined from TRIM sputtering simulations, indicate an overall 35% reduction of near-surface oxygen abundance. XPS analyses of simulant samples exposed to singly and multicharged Ar ions show the characteristic signature of reduced (metallic) Fe, consistent with the preferential ejection of oxygen atoms that can occur in potential sputtering of some metal oxides.

Synthesis and characterization of CdTe nanostructures grown by RF magnetron sputtering method

NASA Astrophysics Data System (ADS)

Akbarnejad, Elaheh; Ghoranneviss, Mahmood; Hantehzadeh, Mohammad Reza

2017-08-01

In this paper, we synthesize Cadmium Telluride nanostructures by radio frequency (RF) magnetron sputtering system on soda lime glass at various thicknesses. The effect of CdTe nanostructures thickness on crystalline, optical and morphological properties has been studied by means of X-ray diffraction (XRD), UV-VIS-NIR spectrophotometry, field emission scanning electron microscopy (FESEM) and atomic force microscopy (AFM), respectively. The XRD parameters of CdTe nanostructures such as microstrain, dislocation density, and crystal size have been examined. From XRD analysis, it could be assumed that increasing deposition time caused the formation of the wurtzite hexagonal structure of the sputtered films. Optical properties of the grown nanostructures as a function of film thickness have been observed. All the films indicate more than 60% transmission over a wide range of wavelengths. The optical band gap values of the films have obtained in the range of 1.62-1.45 eV. The results indicate that an RF sputtering method succeeded in depositing of CdTe nanostructures with high purity and controllable physical properties, which is appropriate for photovoltaic and nuclear detector applications.

Dynamics of nanoparticle morphology under low energy ion irradiation.

PubMed

Holland-Moritz, Henry; Graupner, Julia; Möller, Wolfhard; Pacholski, Claudia; Ronning, Carsten

2018-08-03

If nanostructures are irradiated with energetic ions, the mechanism of sputtering becomes important when the ion range matches about the size of the nanoparticle. Gold nanoparticles with diameters of ∼50 nm on top of silicon substrates with a native oxide layer were irradiated by gallium ions with energies ranging from 1 to 30 keV in a focused ion beam system. High resolution in situ scanning electron microscopy imaging permits detailed insights in the dynamics of the morphology change and sputter yield. Compared to bulk-like structures or thin films, a pronounced shaping and enhanced sputtering in the nanostructures occurs, which enables a specific shaping of these structures using ion beams. This effect depends on the ratio of nanoparticle size and ion energy. In the investigated energy regime, the sputter yield increases at increasing ion energy and shows a distinct dependence on the nanoparticle size. The experimental findings are directly compared to Monte Carlo simulations obtained from iradina and TRI3DYN, where the latter takes into account dynamic morphological and compositional changes of the target.

An exploratory study of recycled sputtering and CsF2- current enhancement for AMS

NASA Astrophysics Data System (ADS)

Zhao, X.-L.; Charles, C. R. J.; Cornett, R. J.; Kieser, W. E.; MacDonald, C.; Kazi, Z.; St-Jean, N.

2016-01-01

The analysis of 135Cs/Cs ratios at levels below 10-12 by accelerator mass spectrometry (AMS) would preferably use commonly available negative ion injection systems. The sputter ion sources in these injectors should ideally produce currents of Cs- or Cs-containing molecular anions approaching μA levels from targets containing mg quantities of Cs. However, since Cs is the most electro-positive stable element in nature with a low electron affinity, the generation of large negative atomic, or molecular beams containing Cs, has been very challenging. In addition, the reduction of the interferences from the 135Ba isobar and the primary 133Cs+ beam used for sputtering are also necessary. The measurement of a wide range of the isotope ratios also requires the ion source memory of previous samples be minimized. This paper describes some progresses towards a potential solution of all these problems by recycled sputtering using fluorinating targets of PbF2 with mg CsF mixed in. The problems encountered indicate that considerable further studies and some redesign of the present ion sources will be desirable.

Simulation of the electric potential and plasma generation coupling in magnetron sputtering discharges

NASA Astrophysics Data System (ADS)

Trieschmann, Jan; Krueger, Dennis; Schmidt, Frederik; Brinkmann, Ralf Peter; Mussenbrock, Thomas

2016-09-01

Magnetron sputtering typically operated at low pressures below 1 Pa is a widely applied deposition technique. For both, high power impulse magnetron sputtering (HiPIMS) as well as direct current magnetron sputtering (dcMS) the phenomenon of rotating ionization zones (also referred to as spokes) has been observed. A distinct spatial profile of the electric potential has been associated with the latter, giving rise to low, mid, and high energy groups of ions observed at the substrate. The adherent question of which mechanism drives this process is still not fully understood. This query is approached using Monte Carlo simulations of the heavy particle (i.e., ions and neutrals) transport consistently coupled to a pre-specified electron density profile via the intrinsic electric field. The coupling between the plasma generation and the electric potential, which establishes correspondingly, is investigated. While the system is observed to strive towards quasi-neutrality, distinct mechanisms governing the shape of the electric potential profile are identified. This work is supported by the German Research Foundation (DFG) in the frame of the transregional collaborative research centre TRR 87.

The effect of plasma impurities on the sputtering of tungsten carbide

NASA Astrophysics Data System (ADS)

Vörtler, K.; Björkas, C.; Nordlund, K.

2011-03-01

Understanding of sputtering by ion bombardment is needed in a wide range of applications. In fusion reactors, ion impacts originating from a hydrogen-isotope-rich plasma will lead, among other effects, to sputtering of the wall material. To study the effect of plasma impurities on the sputtering of the wall mixed material tungsten carbide molecular dynamics simulations were carried out. Simulations of cumulative D cobombardment with C, W, He, Ne or Ar impurities on crystalline tungsten carbide were performed in the energy range 100-300 eV. The sputtering yields obtained at low fluences were compared to steady state SDTrimSP yields. During bombardment single C atom sputtering was preferentially observed. We also detected significant WxCy molecule sputtering. We found that this molecule sputtering mechanism is of physical origin.

Molecular Depth Profiling of Sucrose Films: A Comparative Study of C₆₀n⁺ Ions and Traditional Cs⁺ and O₂⁺ Ions

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zhu, Zihua; Nachimuthu, Ponnusamy; Lea, Alan S.

2009-10-15

Time-of-flight secondary ion mass spectrometry (ToF-SIMS) depth profiling of sucrose thin films were investigated using 10 keV C60+, 20 keV C602+, 30 keV C603+, 250 eV, 500 eV and 1000 eV Cs+ and O2+ as sputtering ions. With C60n+ ions, the molecular ion signal initially decreases, and reaches a steady-state that is about 38-51% of its original intensity, depending on the energy of the C60n+ ions. On the contrary, with Cs+ and O2+ sputtering, molecular ion signals decrease quickly to the noise level, even using low energy (250 eV) sputtering ions. In addition, the sucrose/Si interface by C60+ sputtering ismore » much narrower than that of Cs+ and O2+ sputtering. To understand the mechanisms of sputtering-induced damage by these ions, X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) were used to characterize the bottoms of these sputter craters. XPS data show very little chemical change in the C60+ sputter crater, while considerable amorphous carbon was found in the O2+ and Cs+ sputter craters, indicating extensive decomposition of the sucrose molecules. AFM images show a very flat bottom in the C60+ sputter crater, while the Cs+ and O2+ sputter crater bottoms are significantly rougher than that of the C60+ sputter crater. Based on above data, we developed a simple model to explain different damage mechanisms during sputtering process.« less

Supported plasma sputtering apparatus for high deposition rate over large area

DOEpatents

Moss, Ronald W.; McClanahan, Jr., Edwin D.; Laegreid, Nils

1977-01-01

A supported plasma sputtering apparatus is described having shaped electrical fields in the electron discharge region between the cathode and anode and the sputter region between the target and substrate while such regions are free of any externally applied magnetic field to provide a high deposition rate which is substantially uniform over a wide area. Plasma shaping electrodes separate from the anode and target shape the electrical fields in the electron discharge region and the sputter region to provide a high density plasma. The anode surrounds the target to cause substantially uniform sputtering over a large target area. In one embodiment the anode is in the form of an annular ring surrounding a flat target surface, such anode being provided with a ribbed upper surface which shields portions of the anode from exposure to sputtered material to maintain the electron discharge for a long stable operation. Several other embodiments accomplish the same result by using different anodes which either shield the anode from sputtered material, remove the sputtered coating on the anode by heating, or simultaneously mix sputtered metal from the auxiliary target with sputtered insulator from the main target so the resultant coating is conductive. A radio frequency potential alone or together with a D.C. potential, may be applied to the target for a greater sputtering rate.

Characterizations of the Core-Shell Structured MgB2/CARBON Fiber Synthesis by Rf-Sputtering and Thermal Evaporation

NASA Astrophysics Data System (ADS)

Park, Sung Chang; Lim, Yeong Jin; Lee, Tae-Keun; Kim, Cheol Jin

MgB2/carbon fibers have been synthesized by the combination of RF-sputtering of B and thermal evaporation of Mg, followed by co-evaporation. First, boron layer was deposited by RF-sputtering on the carbon fiber with average diameter of 7.1 μm. Later this coated layer of B was reacted with Mg vapor to transform into MgB2. Since the MgB2 reaction proceed with Mg diffusion into the boron layer, Mg vapor pressure and the diffusion time had to be controlled precisely to secure the complete reaction. Also the deposition rate of each element was controlled separately to obtain stoichiometric MgB2, since Mg was evaporated by thermal heating and B by sputtering system. The sintered B target was magnetron sputtered at the RF-power of ~200 W, which corresponded to the deposition rate of ~3.6 Å/s. With the deposition rate of B fixed, the vapor pressure of Mg was controlled by varying the temperature of tungsten boat with heating element control unit between 100 and 900°C. The MgB2 layers with the thickness of 200-950 nm could be obtained and occasionally MgO appeared as a second phase. Superconducting transition temperatures were measured around ~38 K depending on the deposition condition.

Generation of whistler-wave heated discharges with planar resonant RF networks.

PubMed

Guittienne, Ph; Howling, A A; Hollenstein, Ch

2013-09-20

Magnetized plasma discharges generated by a planar resonant rf network are investigated. A regime transition is observed above a magnetic field threshold, associated with rf waves propagating in the plasma and which present the characteristics of whistler waves. These wave heated regimes can be considered as analogous to conventional helicon discharges, but in planar geometry.

Angular and velocity distributions of tungsten sputtered by low energy argon ions

NASA Astrophysics Data System (ADS)

Marenkov, E.; Nordlund, K.; Sorokin, I.; Eksaeva, A.; Gutorov, K.; Jussila, J.; Granberg, F.; Borodin, D.

2017-12-01

Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85-200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking into account random crystallographic surface orientation is developed, and applied for the case under consideration. The simulations approximate experimental results well. At low energies the distributions acquire "butterfly-like" shape with lower sputtering yields for close to normal angles comparing to the cosine distribution. The energy distributions of sputtered particles were simulated. The Thompson distribution remains valid down to near-threshold 85 eV case.

Large area ion beam sputtered YBa2Cu3O(7-delta) films for novel device structures

NASA Astrophysics Data System (ADS)

Gauzzi, A.; Lucia, M. L.; Kellett, B. J.; James, J. H.; Pavuna, D.

1992-03-01

A simple single-target ion-beam system is employed to manufacture large areas of uniformly superconducting YBa2Cu3O(7-delta) films which can be reproduced. The required '123' stoichiometry is transferred from the target to the substrate when ion-beam power, target/ion-beam angle, and target temperature are adequately controlled. Ion-beam sputtering is experimentally demonstrated to be an effective technique for producing homogeneous YBa2Cu3O(7-delta) films.

Oxygen Interaction With Space-Power Materials

NASA Technical Reports Server (NTRS)

Eck, Thomas G.; Hoffman, Richard W.

1996-01-01

Four investigations were undertaken during the period of this grant: (1 ) oxidation of molybdenum and of niobium-1 % zirconium, (2) preparation of and examination of EOIM-3 samples, (3) sputtering of Teflon by oxygen ion bombardment,and (4) sputtering of Ions from copper and aluminum by oxygen and argon ion bombardment. Investigations (1), (3), and (4) used a low-energy Ion gun to bombard surfaces within an ultra-high vacuum system. Particles ejected from the surfaces were detected by a mass spectrometer.

A High Power Helicon Antenna Design for DIII-D

DOE PAGES

Nagy, A.; deGrassie, J.; Moeller, C.; ...

2017-08-02

A new antenna design for driving current in high beta tokamaks using electromagnetic waves, called Helicons, will be experimentally tested for the first time at power approaching 1 megawatt (MW) in the DIII-D Tokamak. This method is expected to be more efficient than current drive using electron cyclotron waves or neutral beam injection, and may be well suited to reactor-like configurations. A low power (100 watt (W)) 476 megahertz (MHz) “comb-line” antenna, consisting of 12 inductively coupled electrostatically shielded, modular resonators, was tested in DIII-D and showed strong coupling to the plasma without disturbing its characteristics or introducing metal impurities.more » The high power antenna consists of 30 modules affixed to back-plates and mounted on the outer wall of the vacuum vessel above the mid-plane. The antenna design follows a similar low power antenna design modified to minimize RF loss. Heat removal is provided by water cooling and a novel heat conducting path using pyrolytic graphite sheet. The CuCrZr antenna modules are designed to handle high eddy current forces. The modules use molybdenum Faraday shields that have the plasma side coated with boron carbide to enhance thermal resistance and minimize high Z impurities. A RF strip-line feed routes the RF power from coaxial vacuum feed-throughs to the antenna. Multipactor analysis of the antenna, strip line, and feedthrough will be performed. A 1.2 MW, 476 MHz klystron system, provided by the Stanford Linear Accelerator (SLAC) will provide RF power to the new antenna. Lastly, a description of the design of the high power antenna, the RF strip-line feeds, and the vessel installation will be presented.« less

A High Power Helicon Antenna Design for DIII-D

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nagy, A.; deGrassie, J.; Moeller, C.

A new antenna design for driving current in high beta tokamaks using electromagnetic waves, called Helicons, will be experimentally tested for the first time at power approaching 1 megawatt (MW) in the DIII-D Tokamak. This method is expected to be more efficient than current drive using electron cyclotron waves or neutral beam injection, and may be well suited to reactor-like configurations. A low power (100 watt (W)) 476 megahertz (MHz) “comb-line” antenna, consisting of 12 inductively coupled electrostatically shielded, modular resonators, was tested in DIII-D and showed strong coupling to the plasma without disturbing its characteristics or introducing metal impurities.more » The high power antenna consists of 30 modules affixed to back-plates and mounted on the outer wall of the vacuum vessel above the mid-plane. The antenna design follows a similar low power antenna design modified to minimize RF loss. Heat removal is provided by water cooling and a novel heat conducting path using pyrolytic graphite sheet. The CuCrZr antenna modules are designed to handle high eddy current forces. The modules use molybdenum Faraday shields that have the plasma side coated with boron carbide to enhance thermal resistance and minimize high Z impurities. A RF strip-line feed routes the RF power from coaxial vacuum feed-throughs to the antenna. Multipactor analysis of the antenna, strip line, and feedthrough will be performed. A 1.2 MW, 476 MHz klystron system, provided by the Stanford Linear Accelerator (SLAC) will provide RF power to the new antenna. Lastly, a description of the design of the high power antenna, the RF strip-line feeds, and the vessel installation will be presented.« less

Kinetic and Potential Sputtering of Lunar Regolith: The Contribution of the Heavy Highly Charged (Minority) Solar Wind Ions

NASA Technical Reports Server (NTRS)

Meyer, F. W.; Barghouty, A. F.

2012-01-01

Solar wind sputtering of the lunar surface helps determine the composition of the lunar exosphere and contributes to surface weathering. To date, only the effects of the two dominant solar wind constituents, H+ and He+, have been considered. The heavier, less abundant solar wind constituents have much larger sputtering yields because they have greater mass (kinetic sputtering) and they are highly charged (potential sputtering) Their contribution to total sputtering can therefore be orders of magnitude larger than their relative abundances would suggest

Sputtering yields and surface chemical modification of tin-doped indium oxide in hydrocarbon-based plasma etching

DOE Office of Scientific and Technical Information (OSTI.GOV)

Li, Hu; Karahashi, Kazuhiro; Hamaguchi, Satoshi, E-mail: hamaguch@ppl.eng.osaka-u.ac.jp

2015-11-15

Sputtering yields and surface chemical compositions of tin-doped indium oxide (or indium tin oxide, ITO) by CH{sup +}, CH{sub 3}{sup +}, and inert-gas ion (He{sup +}, Ne{sup +}, and Ar{sup +}) incidence have been obtained experimentally with the use of a mass-selected ion beam system and in-situ x-ray photoelectron spectroscopy. It has been found that etching of ITO is chemically enhanced by energetic incidence of hydrocarbon (CH{sub x}{sup +}) ions. At high incident energy incidence, it appears that carbon of incident ions predominantly reduce indium (In) of ITO and the ITO sputtering yields by CH{sup +} and CH{sub 3}{sup +}more » ions are found to be essentially equal. At lower incident energy (less than 500 eV or so), however, a hydrogen effect on ITO reduction is more pronounced and the ITO surface is more reduced by CH{sub 3}{sup +} ions than CH{sup +} ions. Although the surface is covered more with metallic In by low-energy incident CH{sub 3}{sup +} ions than CH{sup +} ions and metallic In is in general less resistant against physical sputtering than its oxide, the ITO sputtering yield by incident CH{sub 3}{sup +} ions is found to be lower than that by incident CH{sup +} ions in this energy range. A postulation to account for the relation between the observed sputtering yield and reduction of the ITO surface is also presented. The results presented here offer a better understanding of elementary surface reactions observed in reactive ion etching processes of ITO by hydrocarbon plasmas.« less

Effect of working power and pressure on plasma properties during the deposition of TiN films in reactive magnetron sputtering plasma measured using Langmuir probe measurement

NASA Astrophysics Data System (ADS)

How, Soo Ren; Nayan, Nafarizal; Khairul Ahmad, Mohd; Fhong Soon, Chin; Zainizan Sahdan, Mohd; Lias, Jais; Shuhaimi Abu Bakar, Ahmad; Arshad, Mohd Khairuddin Md; Hashim, Uda; Yazid Ahmad, Mohd

2018-04-01

The ion, electron density and electron temperature during formation of TiN films in reactive magnetron sputtering system have been investigated for various settings of radio frequency (RF) power and working pressure by using Langmuir probe measurements. The RF power and working pressure able to affect the densities and plasma properties during the deposition process. In this work, a working pressure (100 and 20 mTorr) and RF power (100, 150 and 200 W) have been used for data acquisition of probe measurement. Fundamental of studied on sputter deposition is very important for improvement of film quality and deposition rate. Higher working pressure and RF power able to produce a higher ion density and reduction of electron temperature.

Modeling of metastable phase formation diagrams for sputtered thin films.

PubMed

Chang, Keke; Music, Denis; To Baben, Moritz; Lange, Dennis; Bolvardi, Hamid; Schneider, Jochen M

2016-01-01

A method to model the metastable phase formation in the Cu-W system based on the critical surface diffusion distance has been developed. The driver for the formation of a second phase is the critical diffusion distance which is dependent on the solubility of W in Cu and on the solubility of Cu in W. Based on comparative theoretical and experimental data, we can describe the relationship between the solubilities and the critical diffusion distances in order to model the metastable phase formation. Metastable phase formation diagrams for Cu-W and Cu-V thin films are predicted and validated by combinatorial magnetron sputtering experiments. The correlative experimental and theoretical research strategy adopted here enables us to efficiently describe the relationship between the solubilities and the critical diffusion distances in order to model the metastable phase formation during magnetron sputtering.

Effect of working pressure on corrosion behavior of nitrogen doped diamond-like carbon thin films deposited by DC magnetron sputtering.

PubMed

Khun, N W; Liu, E

2011-06-01

Nitrogen doped diamond-like carbon thin films were deposited on highly conductive p-silicon(100) substrates using a DC magnetron sputtering deposition system by varying working pressure in the deposition chamber. The bonding structure, adhesion strength, surface roughness and corrosion behavior of the films were investigated by using X-ray photoelectron spectroscopy, micro-Raman spectroscopy, micro-scratch test, atomic force microscopy and potentiodynamic polarization test. A 0.6 M NaCl electrolytic solution was used for the corrosion tests. The optimum corrosion resistance of the films was found at a working pressure of 7 mTorr at which a good balance between the kinetics of the sputtered ions and the surface mobility of the adatoms promoted a microstructure of the films with fewer porosities.

Noble metal nanostructures for double plasmon resonance with tunable properties

NASA Astrophysics Data System (ADS)

Petr, M.; Kylián, O.; Kuzminova, A.; Kratochvíl, J.; Khalakhan, I.; Hanuš, J.; Biederman, H.

2017-02-01

We report and compare two vacuum-based strategies to produce Ag/Au materials characterized by double plasmon resonance peaks: magnetron sputtering and method based on the use of gas aggregation sources (GAS) of nanoparticles. It was observed that the double plasmon resonance peaks may be achieved by both of these methods and that the intensities of individual localized surface plasmon resonance peaks may be tuned by deposition conditions. However, in the case of sputter deposition it was necessary to introduce a separation dielectric interlayer in between individual Ag and Au nanoparticle films which was not the case of films prepared by GAS systems. The differences in the optical properties of sputter deposited bimetallic Ag/Au films and coatings consisted of individual Ag and Au nanoparticles produced by GAS is ascribed to the divers mechanisms of nanoparticles formation.

Sputtering and ion plating for aerospace applications

NASA Technical Reports Server (NTRS)

Spalvins, T.

1981-01-01

Sputtering and ion plating technologies are reviewed in terms of their potential and present uses in the aerospace industry. Sputtering offers great universality and flexibility in depositing any material or in the synthesis of new ones. The sputter deposition process has two areas of interest: thin film and fabrication technology. Thin film sputtering technology is primarily used for aerospace mechanical components to reduce friction, wear, erosion, corrosion, high temperature oxidation, diffusion and fatigue, and also to sputter-construct temperature and strain sensors for aircraft engines. Sputter fabrication is used in intricate aircraft component manufacturing. Ion plating applications are discussed in terms of the high energy evaporant flux and the high throwing power. Excellent adherence and 3 dimensional coverage are the primary attributes of this technology.

Effect of Oblique-Angle Sputtered ITO Electrode in MAPbI3 Perovskite Solar Cell Structures.

PubMed

Lee, Kun-Yi; Chen, Lung-Chien; Wu, Yu-June

2017-10-03

This investigation reports on the characteristics of MAPbI 3 perovskite films on obliquely sputtered ITO/glass substrates that are fabricated with various sputtering times and sputtering angles. The grain size of a MAPbI 3 perovskite film increases with the oblique sputtering angle of ITO thin films from 0° to 80°, indicating that the surface properties of the ITO affect the wettability of the PEDOT:PSS thin film and thereby dominates the number of perovskite nucleation sites. The optimal power conversion efficiency (Eff) is achieved 11.3% in a cell with an oblique ITO layer that was prepared using a sputtering angle of 30° for a sputtering time of 15 min.

Sputtering and ion plating for aerospace applications

NASA Technical Reports Server (NTRS)

Spalvins, T.

1981-01-01

Sputtering and ion plating technologies are reviewed in terms of their potential and present uses in the aerospace industry. Sputtering offers great universality and flexibility in depositing any material or in the synthesis of new ones. The sputter deposition process has two areas of interest: thin film and fabrication technology. Thin film sputtering technology is primarily used for aerospace mechanical components to reduce friction, wear, erosion, corrosion, high temperature oxidation, diffusion and fatigue, and also to sputter-construct temperature and strain sensors for aircraft engines. Sputter fabrication is used in intricate aircraft component manufacturing. Ion plating applications are discussed in terms of the high energy evaporant flux and the high throwing power. Excellent adherence and 3-dimensional coverage are the primary attributes of this technology.

Sputtering phenomena of discharge chamber components in a 30-cm diameter Hg ion thruster

NASA Technical Reports Server (NTRS)

Mantenieks, M. A.; Rawlin, V. K.

1976-01-01

Sputtering and deposition rates were measured for discharge chamber components of a 30-cm diameter mercury ion thruster. It was found that sputtering rates of the screen grid and cathode baffle were strongly affected by geometry of the baffle holder. Sputtering rates of the baffle and screen grid were reduced to 80 and 125 A/hr, respectively, by combination of appropriate geometry and materials selections. Sputtering rates such as these are commensurate with thruster lifetimes of 15,000 hours or more. A semiempirical sputtering model showed good agreement with the measured values.

Magnetron-Sputtered Amorphous Metallic Coatings

NASA Technical Reports Server (NTRS)

Thakoor, A. P.; Mehra, M.; Khanna, S. K.

1985-01-01

Amorphous coatings of refractory metal/metalloid-based alloys deposited by magnetron sputtering provide extraordinary hardness and wear resistance. Sputtering target fabricated by thoroughly mixing powders of tungsten, rhenium, and boron in stated proportions and pressing at 1,200 degrees C and 3,000 lb/in. to second power (21 MPa). Substrate lightly etched by sputtering before deposition, then maintained at bias of - 500 V during initial stages of film growth while target material sputtered onto it. Argon gas at pressure used as carrier gas for sputter deposition. Coatings dense, pinhole-free, extremely smooth, and significantly resistant to chemical corrosion in acidic and neutral aqueous environments.

Low-damage high-throughput grazing-angle sputter deposition on graphene

NASA Astrophysics Data System (ADS)

Chen, C.-T.; Casu, E. A.; Gajek, M.; Raoux, S.

2013-07-01

Despite the prevalence of sputter deposition in the microelectronics industry, it has seen very limited applications for graphene electronics. In this letter, we report systematic investigation of the sputtering induced damages in graphene and identify the energetic sputtering gas neutrals as the primary cause of graphene disorder. We further demonstrate a grazing-incidence sputtering configuration that strongly suppresses fast neutral bombardment and retains graphene structure integrity, creating considerably lower damage than electron-beam evaporation. Such sputtering technique yields fully covered, smooth thin dielectric films, highlighting its potential for contact metals, gate oxides, and tunnel barriers fabrication in graphene device applications.

Co-sputtered amorphous Ge-Sb-Se thin films: optical properties and structure

NASA Astrophysics Data System (ADS)

Halenkovič, Tomáš; Němec, Petr; Gutwirth, Jan; Baudet, Emeline; Specht, Marion; Gueguen, Yann; Sangleboeuf, J.-C.; Nazabal, Virginie

2017-05-01

The unique properties of amorphous chalcogenides such as wide transparency in the infrared region, low phonon energy, photosensitivity and high linear and nonlinear refractive index, make them prospective materials for photonics devices. The important question is whether the chalcogenides are stable enough or how the photosensitivity could be exacerbated for demanded applications. Of this view, the Ge-Sb-Se system is undoubtedly an interesting glassy system given the antinomic behavior of germanium and antimony with respect to photosensitivity. The amorphous Ge-Sb-Se thin films were fabricated by a rf-magnetron co-sputtering technique employing the following cathodes: GeSe2, Sb2Se3 and Ge28Sb12Se60. Radio-frequency sputtering is widely used for film fabrication due to its relative simplicity, easy control, and often stoichiometric material transfer from target to substrate. The advantage of this technique is the ability to explore a wide range of chalcogenide film composition by means of adjusting the contribution of each target. This makes the technique considerably effective for the exploration of properties mentioned above. In the present work, the influence of the composition determined by energy-dispersive X-ray spectroscopy on the optical properties was studied. Optical bandgap energy Egopt was determined using variable angle spectroscopic ellipsometry. The morphology and topography of the selenide sputtered films was studied by scanning electron microscopy and atomic force microscopy. The films structure was determined using Raman scattering spectroscopy.

Testing Done for Lorentz Force Accelerators and Electrodeless Propulsion Technology Development

NASA Technical Reports Server (NTRS)

Pencil, Eric J.; Gilland, James H.; Arrington, Lynn A.; Kamhawi, Hani

2004-01-01

The NASA Glenn Research Center is developing Lorentz force accelerators and electrodeless plasma propulsion for a wide variety of space applications. These applications range from precision control of formation-flying spacecraft to primary propulsion for very high power interplanetary spacecraft. The specific thruster technologies being addressed are pulsed plasma thrusters, magnetoplasmadynamic thrusters, and helicon-electron cyclotron resonance acceleration thrusters. The pulsed plasma thruster mounted on the Earth Observing-1 spacecraft was operated successfully in orbit in 2002. The two-axis thruster system is fully incorporated in the attitude determination and control system and is being used to automatically counteract disturbances in the pitch axis of the spacecraft. Recent on-orbit operations have focused on extended operations to add flight operation time to the total accumulated thruster life. The results of the experiments pave the way for electric propulsion applications on future Earth-imaging satellites.

Modeling Solar-Wind Heavy-Ions' Potential Sputtering of Lunar KREEP Surface

NASA Technical Reports Server (NTRS)

Barghouty, A. F.; Meyer, F. W.; Harris, R. P.; Adams, J. H., Jr.

2012-01-01

Recent laboratory data suggest that potential sputtering may be an important weathering mechanism that can affect the composition of both the lunar surface and its tenuous exosphere; its role and implications, however, remain unclear. Using a relatively simple kinetic model, we will demonstrate that solar-wind heavy ions induced sputtering of KREEP surfaces is critical in establishing the timescale of the overall solar-wind sputtering process of the lunar surface. We will also also show that potential sputtering leads to a more pronounced and significant differentiation between depleted and enriched surface elements. We briefly discuss the impacts of enhanced sputtering on the composition of the regolith and the exosphere, as well as of solar-wind sputtering as a source of hydrogen and water on the moon.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Crăciunescu, Corneliu M., E-mail: corneliu.craciunescu@upt.ro; Mitelea, Ion, E-mail: corneliu.craciunescu@upt.ro; Budău, Victor, E-mail: corneliu.craciunescu@upt.ro

Shape memory alloy films belonging to the NiTi-based systems were deposited on heated and unheated substrates, by magnetron sputtering in a custom made system, and their structure and composition was analyzed using electron microscopy. Several substrates were used for the depositions: glass, Cu-Zn-Al, Cu-Al-Ni and Ti-NiCu shape memory alloy ribbons and kapton. The composition of the Ti-Ni-Cu films showed limited differences, compared to the one of the target and the microstructure for the DC magnetron sputtering revealed crystallized structure with features determined on peel off samples from a Si wafer. Both inter and transcrystalline fractures were observed and related tomore » the interfacial stress developed on cooling from deposition temperature.« less

Survey of heating and current drive for K-DEMO

NASA Astrophysics Data System (ADS)

Mikkelsen, D. R.; Kessel, C. E.; Poli, F. M.; Bertelli, N.; Kim, K.

2018-03-01

We present calculations of heating and current drive by neutral injection and by electromagnetic waves in the ion cyclotron, helicon, lower hybrid, and electron cyclotron frequency ranges for the steady state burn conditions in a K-DEMO configuration with I_p=12.3 MA, a  =  2.1 m, R_o=6.8 m, B_o=7.4 T, \

Electron cyclotron thruster new modeling results preparation for initial experiments

NASA Technical Reports Server (NTRS)

Hooper, E. Bickford

1993-01-01

The following topics are discussed: a whistler-based electron cyclotron resonance heating (ECRH) thruster; cross-field coupling in the helicon approximation; wave propagation; wave structure; plasma density; wave absorption; the electron distribution function; isothermal and adiabatic plasma flow; ECRH thruster modeling; a PIC code model; electron temperature; electron energy; and initial experimental tests. The discussion is presented in vugraph form.

Computer Synthesis Approaches of Hyperboloid Gear Drives with Linear Contact

NASA Astrophysics Data System (ADS)

Abadjiev, Valentin; Kawasaki, Haruhisa

2014-09-01

The computer design has improved forming different type software for scientific researches in the field of gearing theory as well as performing an adequate scientific support of the gear drives manufacture. Here are attached computer programs that are based on mathematical models as a result of scientific researches. The modern gear transmissions require the construction of new mathematical approaches to their geometric, technological and strength analysis. The process of optimization, synthesis and design is based on adequate iteration procedures to find out an optimal solution by varying definite parameters. The study is dedicated to accepted methodology in the creation of soft- ware for the synthesis of a class high reduction hyperboloid gears - Spiroid and Helicon ones (Spiroid and Helicon are trademarks registered by the Illinois Tool Works, Chicago, Ill). The developed basic computer products belong to software, based on original mathematical models. They are based on the two mathematical models for the synthesis: "upon a pitch contact point" and "upon a mesh region". Computer programs are worked out on the basis of the described mathematical models, and the relations between them are shown. The application of the shown approaches to the synthesis of commented gear drives is illustrated.

One Approach to the Synthesis, Design and Manufacture of Hyperboloid Gear Sets With Face Mating Gears. Part 1: Basic Theoretical and Cad Experience

NASA Astrophysics Data System (ADS)

Abadjiev, Valentin; Abadjieva, Emilia

2016-06-01

Hyperboloid gear drives with face mating gears are used to transform rotations between shafts with non-parallel and non-intersecting axes. A special case of these transmissions are Spiroid and Helicon gear drives. The classical gear drives of this type are the Archimedean ones. The objective of this study are hyperboloid gear drives with face meshing, when the pinion possesses threads of conic convolute, Archimedean and involute types, or the pinion has threads of cylindrical convolute, Archimedean and involute types. For simplicity, all three types transmis- sions with face mating gears and a conic pinion are titled Spiroid and all three types transmissions with face mating gears and a cylindrical pinion are titled Helicon. Principles of the mathematical modelling of tooth contact synthesis are discussed in this study. The presented research shows that the synthesis is realized by application of two mathematical models: pitch contact point and mesh region models. Two approaches for synthesis of the gear drives in accordance with Olivier's principles are illustrated. The algorithms and computer programs for optimization synthesis and design of the studied hyperboloid gear drives are presented.

Helicon double layer thruster operation in a low magnetic field mode

NASA Astrophysics Data System (ADS)

Harle, T.; Pottinger, S. J.; Lappas, V. J.

2013-02-01

Direct thrust measurements are made of a helicon double layer thruster operating in a low magnetic field mode. The relationship between the imposed axial magnetic field and generated thrust is investigated for a radio frequency input power range 200-500 W for propellant flow rates of 16.5 and 20 sccm (0.46 and 0.55 mg s-1) of argon. The measured thrust shows a strong dependence on the magnetic field strength, increasing by up to a factor of 5 compared with the minimum thrust level recorded. A peak thrust of 0.4-1.1 mN depending on thruster operating conditions is obtained. This increase is observed to take place over a small range of peak magnetic field strengths in the region of 70-110 G. The magnitude of the thrust and the corresponding magnitude of the magnetic field at which the peak thrust occurs is shown to increase with increasing input power for a given propellant flow rate. The ion current determined using a retarding field energy analyser and the electron number density found using a microwave resonator probe both correlate with the observed trend in thrust as a function of applied magnetic field.

Transition From High Harmonic Fast Wave to Whistler/Helicon Regime in Tokamaks

NASA Astrophysics Data System (ADS)

Harris, S. P.; Pinsker, R. I.; Porkolab, M.

2014-10-01

Experiments are being prepared1 on DIII-D in which fast waves (FWs) at 0.5 GHz will be used to drive current noninductively in the mid-radius region. Previous DIII-D experiments used FWs at ~0.1 GHz to drive central current; in this work we examine the frequency dependence of wave propagation and damping in the 0.1-1.0 GHz range with the goal of identifying the optimum frequency range for a particular application. Strongly enhanced electron damping and reduced ion damping at higher frequencies must be weighed against increasing coupling difficulties at higher frequencies and more restrictive wave accessibility at low toroidal field. Wave propagation and accessibility is studied with ray tracing models in slab, cylindrical, and fully toroidal geometries. Analytic expressions for electron and ion damping will be derived with an emphasis on understanding the transition from the moderate-to-high ion cyclotron harmonic regime to the very high harmonic or ``whistler''/``helicon''/lower hybrid FW regime. Work supported in part by the National Undergraduate Fellowship Program in Plasma Physics and Fusion Energy Sciences and the US Department of Energy under DE-FC02-04ER54698.

A Comparison of Laser Induced Florescence and Continuous Wave Ring Down Spectroscopy Measurements of Argon Ion and Neutral VDFs in a Helicon Plasma

NASA Astrophysics Data System (ADS)

McCarren, Dustin; Vandervort, Robert; Carr, Jerry, Jr.; Scime, Earl

2012-10-01

In this work, we compare two spectroscopic methods for measuring the velocity distribution functions (VDFs) of argon ions and neutrals in a helicon plasma: laser induced florescence (LIF) and continuous wave cavity ring down spectroscopy (CW-CRDS). An established and powerful technique, LIF suffers from the requirement that the initial state of the LIF sequence have a substantial density. In most cases, this requirement limits LIF to ions and atoms with large metastable state densities for the given plasma conditions. CW-CRDS is considerably more sensitive than LIF and can potentially be applied to much lower density populations of ion and atom states. However, CRDS is a line integrated technique that lacks the spatial resolution of LIF. CRDS is a proven, ultra-sensitive, cavity enhanced absorption spectroscopy technique and when combined with a CW diode laser that has a sufficiently narrow linewidth, the Doppler broadened absorption line, i.e., the VDFs, can be measured. We present CW-CRDS and LIF measurements of the VDFs in an argon plasma using the 668.614 nm (in vacuum) line of Ar II and the 667.9125 nm (in vacuum) line of Ar I.

Sputtering of uranium

NASA Technical Reports Server (NTRS)

Gregg, R.; Tombrello, T. A.

1978-01-01

Results are presented for an experimental study of the sputtering of U-235 atoms from foil targets by hydrogen, helium, and argon ions, which was performed by observing tracks produced in mica by fission fragments following thermal-neutron-induced fission. The technique used allowed measurements of uranium sputtering yields of less than 0.0001 atom/ion as well as yields involving the removal of less than 0.01 monolayer of the uranium target surface. The results reported include measurements of the sputtering yields for 40-120-keV protons, 40-120-keV He-4(+) ions, and 40- and 80-keV Ar-40(+) ions, the mass distribution of chunks emitted during sputtering by the protons and 80-keV Ar-40(+) ions, the total chunk yield during He-4(+) sputtering, and some limited data on molecular sputtering by H2(+) and H3(+). The angular distribution of the sputtered uranium is discussed, and the yields obtained are compared with the predictions of collision cascade theory.

Investigation of blister formation in sputtered Cu{sub 2}ZnSnS{sub 4} absorbers for thin film solar cells

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bras, Patrice, E-mail: patrice.bras@angstrom.uu.se; Sterner, Jan; Platzer-Björkman, Charlotte

2015-11-15

Blister formation in Cu{sub 2}ZnSnS{sub 4} (CZTS) thin films sputtered from a quaternary compound target is investigated. While the thin film structure, composition, and substrate material are not correlated to the blister formation, a strong link between sputtering gas entrapment, in this case argon, and blistering effect is found. It is shown that argon is trapped in the film during sputtering and migrates to locally form blisters during the high temperature annealing. Blister formation in CZTS absorbers is detrimental for thin film solar cell fabrication causing partial peeling of the absorber layer and potential shunt paths in the complete device.more » Reduced sputtering gas entrapment, and blister formation, is seen for higher sputtering pressure, higher substrate temperature, and change of sputtering gas to larger atoms. This is all in accordance with previous publications on blister formation caused by sputtering gas entrapment in other materials.« less

DOE Office of Scientific and Technical Information (OSTI.GOV)

Fleddermann, C.B.

The sputter deposition of high-temperature superconducting thin films was studied using optical emission spectroscopy. Argon or oxygen ions generated by a Kaufman ion gun were used to sputter material from a composite target containing yttrium, barium, and copper which had been oxygen annealed. The impact of ions onto the target generates a plume of sputtered material which includes various excited-state atoms and molecules. In these studies, optical emission is detected for all the metallic components of the film as well as for metallic oxides ejected from the target. No emission due to atomic or molecular oxygen was detected, however. Variationsmore » in sputter conditions such as changes in sputter ion energy, oxygen content of the beam, and target temperature are shown to greatly affect the emission intensity, which may correlate to the characteristics of the sputtering and the quality of the films deposited. The results suggest that optical emission from the sputtered material may be useful for real-time monitoring and control of the sputter deposition process.« less

Discharge Characteristic of VHF-DC Superimposed Magnetron Sputtering System

NASA Astrophysics Data System (ADS)

Toyoda, Hirotaka; Fukuoka, Yushi; Fukui, Takashi; Takada, Noriharu; Sasai, Kensuke

2014-10-01

Magnetron plasmas are one of the most important tools for sputter deposition of thin films. However, energetic particles from the sputtered target such as backscattered rare gas atoms or oxygen negative ions from oxide targets sometimes induce physical and chemical damages as well as surface roughening to the deposited film surface during the sputtering processes. To suppress kinetic energy of such particles, superposition of RF or VHF power to the DC power has been investigated. In this study, influence of the VHF power superposition on the DC target voltage, which is important factor to determine kinetic energy of high energy particles, is investigated. In the study, 40 MHz VHF power was superimposed to an ITO target and decrease in the target DC voltage was measured as well as deposited film deposition properties such as deposition rate or electrical conductivity. From systematic measurement of the target voltage, it was revealed that the target voltage can be determined by a very simple parameter, i.e., a ratio of VHF power to the total input power (DC and VHF powers) in spite of the DC discharge current. Part of this work was supported by ASTEP, JST.

Flexible Al-doped ZnO films grown on PET substrates using linear facing target sputtering for flexible OLEDs

NASA Astrophysics Data System (ADS)

Jeong, Jin-A.; Shin, Hyun-Su; Choi, Kwang-Hyuk; Kim, Han-Ki

2010-11-01

We report the characteristics of flexible Al-doped zinc oxide (AZO) films prepared by a plasma damage-free linear facing target sputtering (LFTS) system on PET substrates for use as a flexible transparent conducting electrode in flexible organic light-emitting diodes (OLEDs). The electrical, optical and structural properties of LFTS-grown flexible AZO electrodes were investigated as a function of dc power. We obtained a flexible AZO film with a sheet resistance of 39 Ω/squ and an average transmittance of 84.86% in the visible range although it was sputtered at room temperature without activation of the Al dopant. Due to the effective confinement of the high-density plasma between the facing AZO targets, the AZO film was deposited on the PET substrate without plasma damage and substrate heating caused by bombardment of energy particles. Moreover, the flexible OLED fabricated on the AZO/PET substrate showed performance similar to the OLED fabricated on a ITO/PET substrate in spite of a lower work function. This indicates that LFTS is a promising plasma damage-free and low-temperature sputtering technique for deposition of flexible and indium-free AZO electrodes for use in cost-efficient flexible OLEDs.

The Effect on the Lunar Exosphere of a Coroual Mass Ejection Passage

NASA Technical Reports Server (NTRS)

Killen, R. M.; Hurley, D. M.; Farrell, W. M.

2011-01-01

Solar wind bombardment onto exposed surfaces in the solar system produces an energetic component to the exospheres about those bodies. The solar wind energy and composition are highly dependent on the origin of the plasma. Using the measured composition of the slow wind, fast wind, solar energetic particle (SEP) population, and coronal mass ejection (CME), broken down into their various components, we have estimated the total sputter yield for each type of solar wind. We show that the heavy ion component, especially the He++ and 0+7 can greatly enhance the total sputter yield during times when the heavy ion population is enhanced. Folding in the flux, we compute the source rate for several species during different types of solar wind. Finally, we use a Monte Carlo model developed to simulate the time-dependent evolution of the lunar exosphere to study the sputtering component of the exosphere under the influence of a CME passage. We simulate the background exosphere of Na, K, Ca, and Mg. Simulations indicate that sputtering increases the mass of those constituents in the exosphere a few to a few tens times the background values. The escalation of atmospheric density occurs within an hour of onset The decrease in atmospheric density after the CME passage is also rapid, although takes longer than the increase, Sputtered neutral particles have a high probability of escaping the moon,by both Jeans escape and photo ionization. Density and spatial distribution of the exosphere can be tested with the LADEE mission.

Electric tunable behavior of sputtered lead barium zirconate thin films

NASA Astrophysics Data System (ADS)

Wu, Lin-Jung; Wu, Jenn-Ming; Huang, Hsin-Erh; Bor, Hui-Yun

2007-02-01

Lead barium zirconate (PBZ) films were grown on Pt /Ti/SiO2/Si substrates by rf-magnetron sputtering. The sputtered PBZ films possess pure perovskite phase, uniform microstructure, and excellent tunable behaviors. The tunability and loss tangent of sputtered PBZ films depend greatly on the oxygen mixing ratio (OMR). The optimal dielectric tunable behavior occurs in the PBZ films sputtered at 10% OMR. The sputtered PBZ film (10% OMR) possesses a value of figure of merit of 60, promising for frequency-agile applications. Bulk acoustic waves induced by electromechanical coupling occur at 2.72GHz, which is useful in fabricating filters and related devices in the microwave range.

Molybdenum and carbon atom and carbon cluster sputtering under low-energy noble gas plasma bombardment

NASA Astrophysics Data System (ADS)

Oyarzabal, Eider

Exit-angle resolved Mo atom sputtering yield under Xe ion bombardment and carbon atom and cluster (C2 and C3) sputtering yields under Xe, Kr, Ar, Ne and He ion bombardment from a plasma are measured for low incident energies (75--225 eV). An energy-resolved quadrupole mass spectrometer (QMS) is used to detect the fraction of un-scattered sputtered neutrals that become ionized in the plasma; the angular distribution is obtained by changing the angle between the target and the QMS aperture. A one-dimensional Monte Carlo code is used to simulate the interaction of the plasma and the sputtered particles between the sample and the QMS. The elastic scattering cross-sections of C, C2 and C3 with the different bombarding gas neutrals is obtained by varying the distance between the sample and the QMS and by performing a best fit of the simulation results to the experimental results. Because the results obtained with the QMS are relative, the Mo atom sputtering results are normalized to the existing data in the literature and the total sputtering yield for carbon (C+C 2+C3) for each bombarding gas is obtained from weight loss measurements. The absolute sputtering yield for C, C2 and C 3 is then calculated from the integration of the measured angular distribution, taking into account the scattering and ionization of the sputtered particles between the sample and the QMS. The angular sputtering distribution for Mo has a maximum at theta=60°, and this maximum becomes less pronounced as the incident ion energy increases. The results of the Monte Carlo TRIDYN code simulation for the angular distribution of Mo atoms sputtered by Xe bombardment are in agreement with the experiments. For carbon sputtering under-cosine angular distributions of the sputtered atoms and clusters for all the studied bombarding gases are also observed. The C, C2 and C3 sputtering yield data shows a clear decrease of the atom to cluster (C/C2 and C/C3) sputtering ratio as the incident ion mass increases, changing from a carbon atom preferential erosion for the lower incident ion masses (He, Ne and Ar) to a cluster preferential erosion for the higher incident ion masses (Kr and Xe).

Ion beam sputter etching and deposition of fluoropolymers

NASA Technical Reports Server (NTRS)

Banks, B. A.; Sovey, J. S.; Miller, T. B.; Crandall, K. S.

1978-01-01

Fluoropolymer etching and deposition techniques including thermal evaporation, RF sputtering, plasma polymerization, and ion beam sputtering are reviewed. Etching and deposition mechanism and material characteristics are discussed. Ion beam sputter etch rates for polytetrafluoroethylene (PTFE) were determined as a function of ion energy, current density and ion beam power density. Peel strengths were measured for epoxy bonds to various ion beam sputtered fluoropolymers. Coefficients of static and dynamic friction were measured for fluoropolymers deposited from ion bombarded PTFE.

Sputtering from a Porous Material by Penetrating Ions

NASA Technical Reports Server (NTRS)

Rodriguez-Nieva, J. F.; Bringa, E. M.; Cassidy, T. A.; Johnson, R. E.; Caro, A.; Fama, M.; Loeffler, M.; Baragiola, R. A.; Farkas, D.

2012-01-01

Porous materials are ubiquitous in the universe and weathering of porous surfaces plays an important role in the evolution of planetary and interstellar materials. Sputtering of porous solids in particular can influence atmosphere formation, surface reflectivity, and the production of the ambient gas around materials in space, Several previous studies and models have shown a large reduction in the sputtering of a porous solid compared to the sputtering of the non-porous solid. Using molecular dynamics simulations we study the sputtering of a nanoporous solid with 55% of the solid density. We calculate the electronic sputtering induced by a fast, penetrating ion, using a thermal spike representation of the deposited energy. We find that sputtering for this porous solid is, surprisingly, the same as that for a full-density solid, even though the sticking coefficient is high.

Identification and assessment of professional competencies for implementation of nanotechnology in engineering education

NASA Astrophysics Data System (ADS)

Jean, Ming-Der; Jiang, Ji-Bin; Chien, Jia-Yi

2017-11-01

The purpose of this study was to construct the indicators of professional competencies of the nanotechnology-based sputtering system industry based on industry requirements and analyse the core competencies of the industry for promoting the human resource of physical vapour deposition technology. The document analysis, expert interview, and Delphi technique surveys were considered and the survey items with 32 items divided into 7 domains were selected according to consensus opinions of 10 experts by the Delphi survey technique. Through three questionnaire surveys' analysis, the professional competence scales for the K-S tests showed a good internal consistency. The findings of this study provide guidelines for professional competence for nanotechnology-based sputtering technology by applying surface heat-treatment industry. These guidelines can also reveal the practical competency requirements of nanotechnology-based sputtering technology to deal with any subsequent challenges, future developments, and invisible services for students in a technology institute programme.

Increased fracture depth range in controlled spalling of (100)-oriented germanium via electroplating

DOE PAGES

Crouse, Dustin; Simon, John; Schulte, Kevin L.; ...

2018-01-31

Controlled spalling in (100)-oriented germanium using a nickel stressor layer shows promise for semiconductor device exfoliation and kerfless wafering. Demonstrated spall depths of 7-60 um using DC sputtering to deposit the stressor layer are appropriate for the latter application but spall depths < 5 um may be required to minimize waste for device applications. This work investigates the effect of tuning both electroplating current density and electrolyte chemistry on the residual stress in the nickel and on the achievable spall depth range for the Ni/Ge system as a lower-cost, higher-throughput alternative to sputtering. By tuning current density and electrolyte phosphorousmore » concentration, it is shown that electroplating can successfully span the same range of spalled thicknesses as has previously been demonstrated by sputtering and can reach sufficiently high stresses to enter a regime of thickness (<7 um) appropriate to minimize substrate consumption for device applications.« less

Characterization of polycrystalline nickel cobaltite nanostructures prepared by DC plasma magnetron co-sputtering for gas sensing applications

NASA Astrophysics Data System (ADS)

Hammadi, Oday A.; Naji, Noor E.

2018-03-01

In this work, a gas sensor is fabricated from polycrystalline nickel cobaltite nano films deposited on transparent substrates by closed-field unbalanced dual-magnetrons (CFUBDM) co-sputtering technique. Two targets of nickel and cobalt are mounted on the cathode of discharge system and co-sputtered by direct current (DC) argon discharge plasma in presence of oxygen as a reactive gas. The total gas pressure is 0.5 mbar and the mixing ratio of Ar:O2 gases is 5:1. The characterization measurements performed on the prepared films show that their transmittance increases with the incident wavelength, the polycrystalline structure includes 5 crystallographic planes, the average particle size is about 35 nm, the electrical conductivity is linearly increasing with increasing temperature, and the activation energy is about 0.41 eV. These films show high sensitivity to ethanol vapor.

Additive patterning of ion-beam-sputtered non-conformal Ni80Fe20 and Co70Fe30 magnetic films

NASA Astrophysics Data System (ADS)

Redondo, C.; Moralejo, S.; Castaño, F.; Lee, W.; Nielsch, K.; Ross, C. A.; Castaño, F. J.

2006-04-01

Additive patterning processes of magnetic films grown using an ion-beam sputter (IBS) system designed to produce non-conformal films are described. The effects of the ion-gun beam current and Ar pressure on the sputtering rates and roughness of Ni80Fe20 and Co70Fe30 magnetic thin films are investigated using atomic-force microscopy (AFM) and the films' magnetic properties are measured using spatially resolved magneto-optical magnetometry. By tailoring the plasma solid angle, non-conformal film growth allows for simple additive patterning down to lateral dimensions ranging from a few microns to the deep-submicron regime, using templates defined by photolithography or electron-beam lithography, and shadow masks created using templated self-assembly. The magnetization reversal exhibited by patterned sub-200 nm nanodisc arrays with different lateral edge-roughness will be discussed.

Increased fracture depth range in controlled spalling of (100)-oriented germanium via electroplating

DOE Office of Scientific and Technical Information (OSTI.GOV)

Crouse, Dustin; Simon, John; Schulte, Kevin L.

Controlled spalling in (100)-oriented germanium using a nickel stressor layer shows promise for semiconductor device exfoliation and kerfless wafering. Demonstrated spall depths of 7-60 um using DC sputtering to deposit the stressor layer are appropriate for the latter application but spall depths < 5 um may be required to minimize waste for device applications. This work investigates the effect of tuning both electroplating current density and electrolyte chemistry on the residual stress in the nickel and on the achievable spall depth range for the Ni/Ge system as a lower-cost, higher-throughput alternative to sputtering. By tuning current density and electrolyte phosphorousmore » concentration, it is shown that electroplating can successfully span the same range of spalled thicknesses as has previously been demonstrated by sputtering and can reach sufficiently high stresses to enter a regime of thickness (<7 um) appropriate to minimize substrate consumption for device applications.« less

Note on the artefacts in SRIM simulation of sputtering

NASA Astrophysics Data System (ADS)

Shulga, V. I.

2018-05-01

The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputter yield at glancing ion bombardment of smooth amorphous targets and, for heavy ions, greatly underestimates the sputter yield at normal incidence. To understand the reasons for this, the sputtering of amorphous silicon bombarded with different ions was modeled here using the author's program OKSANA. Most simulations refer to 1 keV Xe ions, and angles of incidence cover range from 0 (normal incidence) to almost 90°. It has been shown that SRIM improperly simulates the initial stage of the sputtering process. Some other artefacts in SRIM calculations of sputtering are also revealed and discussed.

Collision-spike sputtering of Au nanoparticles

DOE PAGES

Sandoval, Luis; Urbassek, Herbert M.

2015-08-06

Ion irradiation of nanoparticles leads to enhanced sputter yields if the nanoparticle size is of the order of the ion penetration depth. While this feature is reasonably well understood for collision-cascade sputtering, we explore it in the regime of collision-spike sputtering using molecular-dynamics simulation. For the particular case of 200-keV Xe bombardment of Au particles, we show that collision spikes lead to abundant sputtering with an average yield of 397 ± 121 atoms compared to only 116 ± 48 atoms for a bulk Au target. Only around 31 % of the impact energy remains in the nanoparticles after impact; themore » remainder is transported away by the transmitted projectile and the ejecta. As a result, the sputter yield of supported nanoparticles is estimated to be around 80 % of that of free nanoparticles due to the suppression of forward sputtering.« less

Sputtering of Lunar Regolith Simulant by Protons and Multicharged Heavy Ions at Solar Wind Energies

DOE Office of Scientific and Technical Information (OSTI.GOV)

Meyer, Fred W; Harris, Peter R; Taylor, C. N.

2011-01-01

We report preliminary results on sputtering of a lunar regolith simulant at room temperature by singly and multiply charged solar wind ions using quadrupole and time-of-flight (TOF) mass spectrometry approaches. Sputtering of the lunar regolith by solar-wind heavy ions may be an important particle source that contributes to the composition of the lunar exosphere, and is a possible mechanism for lunar surface ageing and compositional modification. The measurements were performed in order to assess the relative sputtering efficiency of protons, which are the dominant constituent of the solar wind, and less abundant heavier multicharged solar wind constituents, which have highermore » physical sputtering yields than same-velocity protons, and whose sputtering yields may be further enhanced due to potential sputtering. Two different target preparation approaches using JSC-1A AGGL lunar regolith simulant are described and compared using SEM and XPS surface analysis.« less

Studies on ion scattering and sputtering processes relevant to ion beam sputter deposition of multicomponent thin films

DOE Office of Scientific and Technical Information (OSTI.GOV)

Auciello, O.; Ameen, M.S.; Kingon, A.I.

1989-01-01

Results from computer simulation and experiments on ion scattering and sputtering processes in ion beam sputter deposition of high Tc superconducting and ferroelectric thin films are presented. It is demonstrated that scattering of neutralized ions from the targets can result in undesirable erosion of, and inert gas incorporation in, the growing films, depending on the ion/target atom ass ratio and ion beam angle of incidence/target/substrate geometry. The studies indicate that sputtering Kr{sup +} or Xe{sup +} ions is preferable to the most commonly used Ar{sup +} ions, since the undesirable phenomena mentioned above are minimized for the first two ions.more » These results are used to determine optimum sputter deposition geometry and ion beam parameters for growing multicomponent oxide thin films by ion beam sputter-deposition. 10 refs., 5 figs.« less

Method of making segmented pyrolytic graphite sputtering targets

DOEpatents

McKernan, Mark A.; Alford, Craig S.; Makowiecki, Daniel M.; Chen, Chih-Wen

1994-01-01

Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface.

Sputter crater formation in the case of microsecond pulsed glow discharge in a Grimm-type source. Comparison of direct current and radio frequency modes

NASA Astrophysics Data System (ADS)

Efimova, Varvara; Hoffmann, Volker; Eckert, Jürgen

2012-10-01

Depth profiling with pulsed glow discharge is a promising technique. The application of pulsed voltage for sputtering reduces the sputtering rate and thermal stress and hereby improves the analysis of thin layered and thermally fragile samples. However pulsed glow discharge is not well studied and this limits its practical use. The current work deals with the questions which usually arise when the pulsed mode is applied: Which duty cycle, frequency and pulse length must be chosen to get the optimal sputtering rate and crater shape? Are the well-known sputtering effects of the continuous mode valid also for the pulsed regime? Is there any difference between dc and rf pulsing in terms of sputtering? It is found that the pulse length is a crucial parameter for the crater shape and thermal effects. Sputtering with pulsed dc and rf modes is found to be similar. The observed sputtering effects at various pulsing parameters helped to interpret and optimize the depth resolution of GD OES depth profiles.

Depth resolution and preferential sputtering in depth profiling of sharp interfaces

NASA Astrophysics Data System (ADS)

Hofmann, S.; Han, Y. S.; Wang, J. Y.

2017-07-01

The influence of preferential sputtering on depth resolution of sputter depth profiles is studied for different sputtering rates of the two components at an A/B interface. Surface concentration and intensity depth profiles on both the sputtering time scale (as measured) and the depth scale are obtained by calculations with an extended Mixing-Roughness-Information depth (MRI)-model. The results show a clear difference for the two extreme cases (a) preponderant roughness and (b) preponderant atomic mixing. In case (a), the interface width on the time scale (Δt(16-84%)) increases with preferential sputtering if the faster sputtering component is on top of the slower sputtering component, but the true resolution on the depth scale (Δz(16-84%)) stays constant. In case (b), the interface width on the time scale stays constant but the true resolution on the depth scale varies with preferential sputtering. For similar order of magnitude of the atomic mixing and the roughness parameters, a transition state between the two extremes is obtained. While the normalized intensity profile of SIMS represents that of the surface concentration, an additional broadening effect is encountered in XPS or AES by the influence of the mean electron escape depth which may even cause an additional matrix effect at the interface.

Molecular dynamics investigation of hexagonal boron nitride sputtering and sputtered particle characteristics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Smith, Brandon D., E-mail: bradenis@umich.edu; Boyd, Iain D.

The sputtering of hexagonal boron nitride (h-BN) by impacts of energetic xenon ions is investigated using a molecular dynamics (MD) model. The model is implemented within an open-source MD framework that utilizes graphics processing units to accelerate its calculations, allowing the sputtering process to be studied in much greater detail than has been feasible in the past. Integrated sputter yields are computed over a range of ion energies from 20 eV to 300 eV, and incidence angles from 0° to 75°. Sputtering of boron is shown to occur at energies as low as 40 eV at normal incidence, and sputtering of nitrogen atmore » as low as 30 eV at normal incidence, suggesting a threshold energy between 20 eV and 40 eV. The sputter yields at 0° incidence are compared to existing experimental data and are shown to agree well over the range of ion energies investigated. The semi-empirical Bohdansky curve and an empirical exponential function are fit to the data at normal incidence, and the threshold energy for sputtering is calculated from the Bohdansky curve fit as 35 ± 2 eV. These results are shown to compare well with experimental observations that the threshold energy lies between 20 eV and 40 eV. It is demonstrated that h-BN sputters predominantly as atomic boron and diatomic nitrogen, and the velocity distribution function (VDF) of sputtered boron atoms is investigated. The calculated VDFs are found to reproduce the Sigmund-Thompson distribution predicted by Sigmund's linear cascade theory of sputtering. The average surface binding energy computed from Sigmund-Thompson curve fits is found to be 4.5 eV for ion energies of 100 eV and greater. This compares well to the value of 4.8 eV determined from independent experiments.« less

Survey of heating and current drive for K-DEMO

DOE PAGES

Mikkelsen, D. R.; Kessel, C. E.; Poli, F. M.; ...

2018-01-22

Here, we present calculations of heating and current drive by neutral injection and by electromagnetic waves in the ion cyclotron, helicon, lower hybrid, and electron cyclotron frequency ranges for the steady state burn conditions in a K-DEMO configuration withmore » $$I_{\\rm p}=12.3$$ MA, a = 2.1 m, $$R_{\\rm o}=6.8$$ m, $$B_{\\rm o}=7.4$$ T, $$ \

Survey of heating and current drive for K-DEMO

DOE Office of Scientific and Technical Information (OSTI.GOV)

Mikkelsen, D. R.; Kessel, C. E.; Poli, F. M.

Here, we present calculations of heating and current drive by neutral injection and by electromagnetic waves in the ion cyclotron, helicon, lower hybrid, and electron cyclotron frequency ranges for the steady state burn conditions in a K-DEMO configuration withmore » $$I_{\\rm p}=12.3$$ MA, a = 2.1 m, $$R_{\\rm o}=6.8$$ m, $$B_{\\rm o}=7.4$$ T, $$ \

Variable frequency matching to a radiofrequency source immersed in vacuum

NASA Astrophysics Data System (ADS)

Charles, C.; Boswell, R. W.; Bish, A.

2013-09-01

A low-weight (0.12 kg) low-volume fixed ceramic capacitor impedance matching system is developed for frequency agile tuning of a radiofrequency (rf) Helicon plasma thruster. Three fixed groups of capacitors are directly mounted onto a two loop rf antenna with the thruster immersed in a vacuum chamber. Optimum plasma tuning at the resonance frequency is demonstrated via measurements of the load impedance, power transfer efficiency and plasma density versus driving frequency in the 12.882-14.238 MHz range. The resonance frequency with the plasma on is higher than the resonance frequency in vacuum. The minimum rf power necessary for ignition decreases when the ignition frequency is shifted downwards from the resonance frequency. This development has direct applications in space qualification and space use of rf plasma thrusters.

H(-) ion source developments at the SNS.

PubMed

Welton, R F; Stockli, M P; Murray, S N; Pennisi, T R; Han, B; Kang, Y; Goulding, R H; Crisp, D W; Sparks, D O; Luciano, N P; Carmichael, J R; Carr, J

2008-02-01

The U.S. Spallation Neutron Source (SNS) will require substantially higher average and pulse H(-) beam currents than can be produced from conventional ion sources such as the base line SNS source. H(-) currents of 40-50 mA (SNS operations) and 70-100 mA (power upgrade project) with a rms emittance of 0.20-0.35pi mm mrad and a approximately 7% duty factor will be needed. We are therefore investigating several advanced ion source concepts based on rf plasma excitation. First, the performance characteristics of an external antenna source based on an Al(2)O(3) plasma chamber combined with an external multicusp magnetic configuration, an elemental Cs system, and plasma gun will be discussed. Second, the first plasma measurements of a helicon-driven H(-) ion source will also be presented.

Ways to improve the efficiency and reliability of radio frequency driven negative ion sources for fusion.

PubMed

Kraus, W; Briefi, S; Fantz, U; Gutmann, P; Doerfler, J

2014-02-01

Large RF driven negative hydrogen ion sources are being developed at IPP Garching for the future neutral beam injection system of ITER. The overall power efficiency of these sources is low, because for the RF power supply self-excited generators are utilized and the plasma is generated in small cylindrical sources ("drivers") and expands into the source main volume. At IPP experiments to reduce the primary power and the RF power required for the plasma production are performed in two ways: The oscillator generator of the prototype source has been replaced by a transistorized RF transmitter and two alternative driver concepts, a spiral coil, in which the field is concentrated by ferrites, which omits the losses by plasma expansion and a helicon source are being tested.

H- ion source developments at the SNSa)

NASA Astrophysics Data System (ADS)

Welton, R. F.; Stockli, M. P.; Murray, S. N.; Pennisi, T. R.; Han, B.; Kang, Y.; Goulding, R. H.; Crisp, D. W.; Sparks, D. O.; Luciano, N. P.; Carmichael, J. R.; Carr, J.

2008-02-01

The U.S. Spallation Neutron Source (SNS) will require substantially higher average and pulse H- beam currents than can be produced from conventional ion sources such as the base line SNS source. H- currents of 40-50mA (SNS operations) and 70-100mA (power upgrade project) with a rms emittance of 0.20-0.35πmmmrad and a ˜7% duty factor will be needed. We are therefore investigating several advanced ion source concepts based on rf plasma excitation. First, the performance characteristics of an external antenna source based on an Al2O3 plasma chamber combined with an external multicusp magnetic configuration, an elemental Cs system, and plasma gun will be discussed. Second, the first plasma measurements of a helicon-driven H- ion source will also be presented.

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver.

PubMed

Gierczak, Mirosław; Prażmowska-Czajka, Joanna; Dziedzic, Andrzej

2018-01-12

This paper describes the design, manufacturing and characterization of newly developed mixed thick-/thin film thermoelectric microgenerators based on magnetron sputtered constantan (copper-nickel alloy) and screen-printed silver layers. The thermoelectric microgenerator consists of sixteen thermocouples made on a 34.2 × 27.5 × 0.25 mm³ alumina substrate. One of thermocouple arms was made of magnetron-sputtered constantan (Cu-Ni alloy), the second was a Ag-based screen-printed film. The length of each thermocouple arm was equal to 27 mm, and their width 0.3 mm. The distance between the arms was equal to 0.3 mm. In the first step, a pattern mask with thermocouples was designed and fabricated. Then, a constantan layer was magnetron sputtered over the whole substrate, and a photolithography process was used to prepare the first thermocouple arms. The second arms were screen-printed onto the substrate using a low-temperature silver paste (Heraeus C8829A or ElectroScience Laboratories ESL 599-E). To avoid oxidation of constantan, they were fired in a belt furnace in a nitrogen atmosphere at 550/450 °C peak firing temperature. Thermoelectric and electrical measurements were performed using the self-made measuring system. Two pyrometers included into the system were used for temperature measurement of hot and cold junctions. The estimated Seebeck coefficient, α was from the range 35 - 41 µV/K, whereas the total internal resistances R were between 250 and 3200 ohms, depending on magnetron sputtering time and kind of silver ink (the resistance of a single thermocouple was between 15.5 and 200 ohms).

Thermoelectric Mixed Thick-/Thin Film Microgenerators Based on Constantan/Silver

PubMed Central

Gierczak, Mirosław; Prażmowska-Czajka, Joanna; Dziedzic, Andrzej

2018-01-01

This paper describes the design, manufacturing and characterization of newly developed mixed thick-/thin film thermoelectric microgenerators based on magnetron sputtered constantan (copper-nickel alloy) and screen-printed silver layers. The thermoelectric microgenerator consists of sixteen thermocouples made on a 34.2 × 27.5 × 0.25 mm3 alumina substrate. One of thermocouple arms was made of magnetron-sputtered constantan (Cu-Ni alloy), the second was a Ag-based screen-printed film. The length of each thermocouple arm was equal to 27 mm, and their width 0.3 mm. The distance between the arms was equal to 0.3 mm. In the first step, a pattern mask with thermocouples was designed and fabricated. Then, a constantan layer was magnetron sputtered over the whole substrate, and a photolithography process was used to prepare the first thermocouple arms. The second arms were screen-printed onto the substrate using a low-temperature silver paste (Heraeus C8829A or ElectroScience Laboratories ESL 599-E). To avoid oxidation of constantan, they were fired in a belt furnace in a nitrogen atmosphere at 550/450 °C peak firing temperature. Thermoelectric and electrical measurements were performed using the self-made measuring system. Two pyrometers included into the system were used for temperature measurement of hot and cold junctions. The estimated Seebeck coefficient, α was from the range 35 − 41 µV/K, whereas the total internal resistances R were between 250 and 3200 ohms, depending on magnetron sputtering time and kind of silver ink (the resistance of a single thermocouple was between 15.5 and 200 ohms). PMID:29329203

Method of making segmented pyrolytic graphite sputtering targets

DOEpatents

McKernan, M.A.; Alford, C.S.; Makowiecki, D.M.; Chen, C.W.

1994-02-08

Anisotropic pyrolytic graphite wafers are oriented and bonded together such that the graphite's high thermal conductivity planes are maximized along the back surface of the segmented pyrolytic graphite target to allow for optimum heat conduction away from the sputter target's sputtering surface and to allow for maximum energy transmission from the target's sputtering surface. 2 figures.

Ion beam sputtering of Ag - Angular and energetic distributions of sputtered and scattered particles

NASA Astrophysics Data System (ADS)

Feder, René; Bundesmann, Carsten; Neumann, Horst; Rauschenbach, Bernd

2013-12-01

Ion beam sputter deposition (IBD) provides intrinsic features which influence the properties of the growing film, because ion properties and geometrical process conditions generate different energy and spatial distribution of the sputtered and scattered particles. A vacuum deposition chamber is set up to measure the energy and spatial distribution of secondary particles produced by ion beam sputtering of different target materials under variation of geometrical parameters (incidence angle of primary ions and emission angle of secondary particles) and of primary ion beam parameters (ion species and energies).

Low energy sputtering of cobalt by cesium ions

NASA Technical Reports Server (NTRS)

Handoo, A.; Ray, Pradosh K.

1989-01-01

An experimental facility to investigate low energy (less than 500 eV) sputtering of metal surfaces with ions produced by an ion gun is described. Results are reported on the sputtering yield of cobalt by cesium ions in the 100 to 500 eV energy range at a pressure of 1 times 10(exp -6) Torr. The target was electroplated on a copper substrate. The sputtered atoms were collected on a cobalt foil surrounding the target. Co-57 was used as a tracer to determine the sputtering yield.

A Closer Look at Solar Wind Sputtering of Lunar Surface Materials

NASA Technical Reports Server (NTRS)

Barghouty, A. F.; Adams, J. H., Jr.; Meyer, F.; Mansur, L.; Reinhold, C.

2008-01-01

Solar-wind induced potential sputtering of the lunar surface may be a more efficient erosive mechanism than the "standard" kinetic (or physical) sputtering. This is partly based on new but limited laboratory measurements which show marked enhancements in the sputter yields of slow-moving, highly-charged ions impacting oxides. The enhancements seen in the laboratory can be orders of magnitude for some surfaces and highly charged incident ions, but seem to depend very sensitively on the properties of the impacted surface in addition to the fluence, energy and charge of the impacting ion. For oxides, potential sputtering yields are markedly enhanced and sputtered species, especially hydrogen and light ions, show marked dependence on both charge and dose.

Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments

NASA Astrophysics Data System (ADS)

Schmehl, Andreas; Mairoser, Thomas; Herrnberger, Alexander; Stephanos, Cyril; Meir, Stefan; Förg, Benjamin; Wiedemann, Birgit; Böni, Peter; Mannhart, Jochen; Kreuzpaintner, Wolfgang

2018-03-01

We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the external limitations and boundaries imposed by the available space at a neutron beamline and by the neutron and vacuum compatibility of the used materials, are assessed. The relevant aspects are then accounted for in the realization of our highly mobile deposition system, which was designed with a focus on a quick and simple installation and removability at the beamline. Apart from the general design, the in-vacuum components, the auxiliary equipment and the remote control via a computer, as well as relevant safety aspects are presented in detail.

High temperature static strain gage development

NASA Technical Reports Server (NTRS)

Hulse, C. O.; Bailey, R. S.; Grant, H. P.; Anderson, W. L.; Przybyszewski, J. S.

1991-01-01

Final results are presented from a program to develop a thin film static strain gage for use on the blades and vanes of running, test stand gas turbine engines with goals of an 3 x 3 mm gage area and total errors of less than 10 pct. of + or - 2,000 microstrain after 50 hrs at 1250 K. Pd containing 13 Wt. pct. Cr was previously identified as a new strain sensor alloy that appeared to be potentially usable to 1250 K. Subsequently, it was discovered, in contrast with its behavior in bulk, that Pd-13Cr suffered from oxidation attack when prepared as a 4.5 micron thick thin film. Continuing problems with electrical leakage to the substrate and the inability of sputtered alumina overcoats to prevent oxidation led to the discovery that sputtered alumina contains appreciable amounts of entrapped argon. After the argon has been exsolved by heating to elevated temperatures, the alumina films undergo a linear shrinkage of about 2 pct. resulting in formation of cracks. These problems can be largely overcome by sputtering the alumina with the substrate heated to 870 K. With 2 micron thick hot sputtered alumina insulation and overcoat films, total 50 hr drifts of about 100 microstrain (2 tests) and about 500 microstrain (1 test) were observed at 1000 and 1100 K, respectively. Results of tests on complete strain gage systems on constant moment bend bars with Pd temperature compensation grids revealed that oxidation of the Pd grid was a major problem even when the grid was overcoated with a hot or cold sputtered alumina overcoat.

Effects on crystal structure of CZTS thin films owing to deionized water and sulfurization treatment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nadi, Samia Ahmed; Chelvanathan, Puvaneswaran; Islam, M. A.

2015-05-15

To condense the cost and increase the production, using abundantly obtainable non-toxic elements, Cu{sub 2}ZnSnS{sub 4} (CZTS) seem to be a strong contender among the photovoltaic thin film technologies. Cu{sub 2}ZnSnS{sub 4} thin films were fabricated by RF magnetron sputtering system. CZTS were sputtered on Molybdenum (Mo) coated soda lime glass (SLG) using a single target sputtering technique. The sputtering parameters (base pressure, working pressure, Argon (Ar) flow rate, RF power and sputtering time) were kept same for all three types of films. For sulfurization, the temperature used was 500 °C. Finally, As-deposited film was immersed in DIW before undergoingmore » identical sulfurization profile. As-deposited film (Sample A), sulfurized films (Sample B) and sulfurized plus DIW treated (Sample C) were compared in terms of their structural properties by means of X-Ray Diffraction (XRD) measurement and Atomic Force Microscopy (AFM). Sample B and C showed peak of (1 1 2) planes of CZTS which are characteristics of stannite structure. Post deposition treatment on CZTS films proved to be beneficial as evident from the observed enhancement in the crystallinity and grain growth. Significant difference on grain size and area roughness could be observed from the AFM measurement. The roughness of Sample A, B and C increased from 5.007 nm to 20.509 nm and 14.183 nm accordingly. From XRD data secondary phases of Cu{sub x}MoS{sub x} could be observed.« less

Method and apparatus for sputtering utilizing an apertured electrode and a pulsed substrate bias

NASA Technical Reports Server (NTRS)

Przybyszewski, J. S.; Shaltens, R. K. (Inventor)

1973-01-01

The method and equipment used for sputtering by use of an apertured electrode and a pulsed substrate bias are discussed. The technique combines the advantages of ion plating with the versatility of a radio frequency sputtered source. Electroplating is accomplished by passing a pulsed high voltage direct current to the article being plated during radio frequency sputtering.

Electrical properties of Si-Si interfaces obtained by room temperature covalent wafer bonding

NASA Astrophysics Data System (ADS)

Jung, A.; Zhang, Y.; Arroyo Rojas Dasilva, Y.; Isa, F.; von Känel, H.

2018-02-01

We study covalent bonds between p-doped Si wafers (resistivity ˜10 Ω cm) fabricated on a recently developed 200 mm high-vacuum system. Oxide- and void free interfaces were obtained by argon (Ar) or neon (Ne) sputtering prior to wafer bonding at room temperature. The influence of the sputter induced amorphous Si layer at the bonding interface on the electrical behavior is accessed with temperature-dependent current-voltage measurements. In as-bonded structures, charge transport is impeded by a potential barrier of 0.7 V at the interface with thermionic emission being the dominant charge transport mechanism. Current-voltage characteristics are found to be asymmetric which can tentatively be attributed to electric dipole formation at the interface as a result of the time delay between the surface preparation of the two bonding partners. Electron beam induced current measurements confirm the corresponding asymmetric double Schottky barrier like band-alignment. Moreover, we demonstrate that defect annihilation at a low temperature of 400 °C increases the electrical conductivity by up to three orders of magnitude despite the lack of recrystallization of the amorphous layer. This effect is found to be more pronounced for Ne sputtered surfaces which is attributed to the lighter atomic mass compared to Ar, inducing weaker lattice distortions during the sputtering.

Reactive sputter deposition of piezoelectric Sc 0.12Al 0.88N for contour mode resonators

DOE PAGES

Henry, Michael David; Young, Travis Ryan; Douglas, Erica Ann; ...

2018-05-11

Substitution of Al by Sc has been predicted and demonstrated to improve the piezoelectric response in AlN for commercial market applications in radio frequency filter technologies. Although cosputtering with multiple targets have achieved Sc incorporation in excess of 40%, industrial processes requiring stable single target sputtering are currently limited. A major concern with sputter deposition of ScAl is the control over the presence of non-c-axis oriented crystal growth, referred to as inclusions here, while simultaneously controlling film stress for suspended microelectromechanical systems (MEMS) structures. In this paper, we describe 12.5% ScAl single target reactive sputter deposition process and establishes amore » direct relationship between the inclusion occurrences and compressive film stress allowing for the suppression of the c-axis instability on silicon (100) and Ti/TiN/AlCu seeding layers. An initial high film stress, for suppressing inclusions, is then balanced with a lower film stress deposition to control total film stress to prevent Euler buckling of suspended MEMS devices. Contour mode resonators fabricated using these films demonstrate effective coupling coefficients up to 2.7% with figures of merit of 42. Finally, this work provides a method to establish inclusion free films in ScAlN piezoelectric films for good quality factor devices.« less

Reactive sputter deposition of piezoelectric Sc 0.12Al 0.88N for contour mode resonators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Henry, Michael David; Young, Travis Ryan; Douglas, Erica Ann

Substitution of Al by Sc has been predicted and demonstrated to improve the piezoelectric response in AlN for commercial market applications in radio frequency filter technologies. Although cosputtering with multiple targets have achieved Sc incorporation in excess of 40%, industrial processes requiring stable single target sputtering are currently limited. A major concern with sputter deposition of ScAl is the control over the presence of non-c-axis oriented crystal growth, referred to as inclusions here, while simultaneously controlling film stress for suspended microelectromechanical systems (MEMS) structures. In this paper, we describe 12.5% ScAl single target reactive sputter deposition process and establishes amore » direct relationship between the inclusion occurrences and compressive film stress allowing for the suppression of the c-axis instability on silicon (100) and Ti/TiN/AlCu seeding layers. An initial high film stress, for suppressing inclusions, is then balanced with a lower film stress deposition to control total film stress to prevent Euler buckling of suspended MEMS devices. Contour mode resonators fabricated using these films demonstrate effective coupling coefficients up to 2.7% with figures of merit of 42. Finally, this work provides a method to establish inclusion free films in ScAlN piezoelectric films for good quality factor devices.« less

Reactive sputter deposition of piezoelectric Sc 0.12Al 0.88N for contour mode resonators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Henry, Michael David; Young, Travis Ryan; Douglas, Erica Ann

Substitution of Al by Sc has been predicted and demonstrated to improve the piezoelectric response in AlN for commercial market applications in radio frequency filter technologies. Although cosputtering with multiple targets have achieved Sc incorporation in excess of 40%, industrial processes requiring stable single target sputtering are currently limited. A major concern with sputter deposition of ScAl is the control over the presence of non-c-axis oriented crystal growth, referred to as inclusions here, while simultaneously controlling film stress for suspended microelectromechanical systems (MEMS) structures. This work describes 12.5% ScAl single target reactive sputter deposition process and establishes a direct relationshipmore » between the inclusion occurrences and compressive film stress allowing for the suppression of the c-axis instability on silicon (100) and Ti/TiN/AlCu seeding layers. An initial high film stress, for suppressing inclusions, is then balanced with a lower film stress deposition to control total film stress to prevent Euler buckling of suspended MEMS devices. Contour mode resonators fabricated using these films demonstrate effective coupling coefficients up to 2.7% with figures of merit of 42. Furthermore, this work provides a method to establish inclusion free films in ScAlN piezoelectric films for good quality factor devices.« less

Development of sputtered techniques for thrust chambers, task 1. [evaluation of filler materials for regeneratively cooled thrust chambers

NASA Technical Reports Server (NTRS)

Mullaly, J. R.; Schmid, T. E.; Hecht, R. J.

1974-01-01

Filler materials proposed for use in the sputter fabrication regeneratively cooled thrust chambers were evaluated. Low melting castable alloys, CERROBEND. CERROCAST, and CERROTRU, slurry applied SERMETEL 481 and flame-sprayed aluminum were investigated as filler materials. Sputter deposition from a cylindrical cathode inverted magnestron was used to apply an OFHC copper closeout layer to filled OFHC copper ribbed-wall cylindrical substrates. The sputtered closeout layer structure was evaluated with respect to filler material contamination, predeposition machining and finishing operations, and deposition parameters. The application of aluminum by flame-spraying resulted in excessiver filler porosity. Though the outgassing from this porosity was found to be detrimental to the closeout layer structure, bond strengths in excess of 10,500 psi were achieved. Removal of the aluminum from the grooves was readily accomplished by leaching in a 7.0 molar solution of sodium hydroxide at 353 K. Of the other filler materials evaluated, CERROTRU was found to be the most suitable material with respect to completely filling the ribbed-wall cylinders and vacuum system compatibility. However, bond contamination resulted in low closeout layer bond strength with the CERROTRU filler. CERROBEND, CERROCAST, and SERMETEL 481 were found to be unacceptable as filler materials.

X-ray analyses of thermally grown and reactively sputtered tantalum oxide films on NiTi alloy

NASA Astrophysics Data System (ADS)

McNamara, Karrina; Tofail, Syed A. M.; Conroy, Derek; Butler, James; Gandhi, Abbasi A.; Redington, Wynette

2012-08-01

Sputter deposition of tantalum (Ta) on the surface of NiTi alloy is expected to improve the alloy's corrosion resistance and biocompatibility. Tantalum is a well-known biomaterial which is not affected by body fluids and is not irritating to human tissue. Here we compare the oxidation chemistry crystal structure evolution of tantalum oxide films grown on NiTi by reactive O2 sputtering and by thermal oxidation of sputter deposited Ta films. The effect of sputtering parameters and post-sputtering treatments on the morphology, oxidation state and crystal structure of the tantalum oxide layer have been investigated by field-emission scanning electron microscopy (FE-SEM), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD). The study has found that it may be better to avoid oxidation at and above 600 °C. The study establishes that reactive sputtering in presence of low oxygen mixture yields thicker film with better control of the film quality except that the surface oxidation state of Ta is slightly lower.

Sputter-deposited fuel cell membranes and electrodes

NASA Technical Reports Server (NTRS)

Narayanan, Sekharipuram R. (Inventor); Jeffries-Nakamura, Barbara (Inventor); Chun, William (Inventor); Ruiz, Ron P. (Inventor); Valdez, Thomas I. (Inventor)

2001-01-01

A method for preparing a membrane for use in a fuel cell membrane electrode assembly includes the steps of providing an electrolyte membrane, and sputter-depositing a catalyst onto the electrolyte membrane. The sputter-deposited catalyst may be applied to multiple sides of the electrolyte membrane. A method for forming an electrode for use in a fuel cell membrane electrode assembly includes the steps of obtaining a catalyst, obtaining a backing, and sputter-depositing the catalyst onto the backing. The membranes and electrodes are useful for assembling fuel cells that include an anode electrode, a cathode electrode, a fuel supply, and an electrolyte membrane, wherein the electrolyte membrane includes a sputter-deposited catalyst, and the sputter-deposited catalyst is effective for sustaining a voltage across a membrane electrode assembly in the fuel cell.

Annealing dependence of residual stress and optical properties of TiO2 thin film deposited by different deposition methods.

PubMed

Chen, Hsi-Chao; Lee, Kuan-Shiang; Lee, Cheng-Chung

2008-05-01

Titanium oxide (TiO(2)) thin films were prepared by different deposition methods. The methods were E-gun evaporation with ion-assisted deposition (IAD), radio-frequency (RF) ion-beam sputtering, and direct current (DC) magnetron sputtering. Residual stress was released after annealing the films deposited by RF ion-beam or DC magnetron sputtering but not evaporation, and the extinction coefficient varied significantly. The surface roughness of the evaporated films exceeded that of both sputtered films. At the annealing temperature of 300 degrees C, anatase crystallization occurred in evaporated film but not in the RF ion-beam or DC magnetron-sputtered films. TiO(2) films deposited by sputtering were generally more stable during annealing than those deposited by evaporation.

Properties of Diamond-Like Carbon Films Synthesized by Dual-Target Unbalanced Magnetron Sputtering

NASA Astrophysics Data System (ADS)

Liu, Cui; Li, Guo-Qing; Gou, Wei; Mu, Zong-Xin; Zhang, Cheng-Wu

2004-11-01

Smooth, dense and uniform diamond-like carbon films (DLC films) for industrial applications have successfully been prepared by dual-target unbalanced magnetron sputtering and the DLC characteristics of the films are confirmed by Raman spectra. It is found that the sputtering current of target plays an important role in the DLC film deposition. Deposition rate of 3.5 μm/h is obtained by using the sputtering current of 30 A. The friction coefficient of the films is 0.2-0.225 measured by using a pin-on-disc microtribometer. The structure of the films tends to have a growth of sp3 bonds content at high sputtering current. The compressive residual stress in the films increases with the increasing sputtering current of the target.

Influence of various surface pretreatments on adherence of sputtered molybdenum disulfide to silver, gold, copper, and bronze

NASA Technical Reports Server (NTRS)

Spalvins, T.

1973-01-01

Solid film lubricants of radio frequency sputtered molybdenum disulfide (MoS2) were applied to silver, gold, copper, and bronze surfaces that had various pretreatments (mechanical polishing, sputter etching, oxidation, and sulfurization). Optical and electron transmission micrographs and electron diffraction patterns were used to interpret the film formation characteristics and to evaluate the sputtering conditions in regard to the film and substrate compatibility. Sputtered MoS2 films flaked and peeled on silver, copper, and bronze surfaces except when the surfaces had been specially oxidized. The flaking and peeling was a result of sulfide compound formation and the corresponding grain growth of the sulfide film. Sputtered MoS2 films showed no peeling and flaking on gold surfaces regardless of surface pretreatment.

Low-Damage Sputter Deposition on Graphene

NASA Astrophysics Data System (ADS)

Chen, Ching-Tzu; Casu, Emanuele; Gajek, Marcin; Raoux, Simone

2013-03-01

Despite its versatility and prevalence in the microelectronics industry, sputter deposition has seen very limited applications for graphene-based electronics. We have systematically investigated the sputtering induced graphene defects and identified the reflected high-energy neutrals of the sputtering gas as the primary cause of damage. In this talk, we introduce a novel sputtering technique that is shown to dramatically reduce bombardment of the fast neutrals and improve the structural integrity of the underlying graphene layer. We also demonstrate that sputter deposition and in-situ oxidation of 1 nm Al film at elevated temperatures yields homogeneous, fully covered oxide films with r.m.s. roughness much less than 1 monolayer, which shows the potential of using such technique for gate oxides, tunnel barriers, and multilayer fabrication in a wide range of graphene devices.

Sputtering of rough surfaces: a 3D simulation study

NASA Astrophysics Data System (ADS)

von Toussaint, U.; Mutzke, A.; Manhard, A.

2017-12-01

The lifetime of plasma-facing components is critical for future magnetic confinement fusion power plants. A key process limiting the lifetime of the first-wall is sputtering by energetic ions. To provide a consistent modeling of the sputtering process of realistic geometries, the SDTrimSP-code has been extended to enable the processing of analytic as well as measured arbitrary 3D surface morphologies. The code has been applied to study the effect of varying the impact angle of ions on rough surfaces on the sputter yield as well as the influence of the aspect ratio of surface structures on the 2D distribution of the local sputtering yields. Depending on the surface morphologies reductions of the effective sputter yields to less than 25% have been observed in the simulation results.

Effect of residual gas on structural, electrical and mechanical properties of niobium films deposited by magnetron sputtering deposition

NASA Astrophysics Data System (ADS)

Wang, Lanruo; Zhong, Yuan; Li, Jinjin; Cao, Wenhui; Zhong, Qing; Wang, Xueshen; Li, Xu

2018-04-01

Magnetron sputtering is an important method in the superconducting thin films deposition. The residual gas inside the vacuum chamber will directly affect the quality of the superconducting films. In this paper, niobium films are deposited by magnetron sputtering under different chamber residual gas conditions. The influence of baking and sputtering process on residual gas are studied as well. Surface morphology, electrical and mechanical properties of the films are analysed. The residual gas analysis result before the sputtering process could be regarded as a reference condition to achieve high quality superconducting thin films.

New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

NASA Astrophysics Data System (ADS)

Belykh, S. F.; Palitsin, V. V.; Veryovkin, I. V.; Kovarsky, A. P.; Chang, R. J. H.; Adriaens, A.; Dowsett, M. G.; Adams, F.

2007-08-01

A simple design for a cesium sputter ion source compatible with vacuum and ion-optical systems as well as with electronics of the commercially available Cameca IMS-4f instrument is reported. This ion source has been tested with the cluster primary ions of Sin- and Cun-. Our experiments with surface characterization and depth profiling conducted to date demonstrate improvements of the analytical capabilities of the secondary ion mass spectrometry instrument due to the nonadditive enhancement of secondary ion emission and shorter ion ranges of polyatomic projectiles compared to atomic ones with the same impact energy.

Low Temperature Film Growth of the Oxides of Zinc, Aluminum, and Vanadium (and Related Systems, Oxides of Gold and Germanium, Nitrides of Aluminum and Tungsten) by Reactive Sputter Deposition.

DTIC Science & Technology

1988-02-01

the optical behavior of the material in its preswitched, or A Perkin-Elmer Model 330 UV - Visible -IR double beam ,% spectrophotometer with a specular...S ~ * ." at.* U a * . a. *%~ ~9g 0 ~ --- a.. ’ a * ~ .r~vaa- *a,~ * ~ * ~****.,*a,* *** UV - Visible -IR Optical Behavior of Sputter Deposited Gee x...Films deposited in 0 to 60% Ar were nominally germania. However, transmission in the UV - visible , the strength of the 245nm defect center, the optical

[Effect of niobium nitride on the bonding strength of titanium porcelain by magnetron sputtering].

PubMed

Wang, Shu-shu; Zhang, La-bao; Guang, Han-bing; Zhou, Shu; Zhang, Fei-min

2010-05-01

To investigate the effect of magnetron sputtered niobium nitride (NbN) on the bonding strength of commercially pure cast titanium (Ti) and low-fusing porcelain (Ti/Vita titankeramik system). Sixty Ti specimens were randomly divided into four groups, group T1, T2, T3 and T4. All specimens of group T1 and T2 were first treated with 120 microm blasted Al2O3 particles, and then only specimens of group T2 were treated with magnetron sputtered NbN film. All specimens of group T3 and T4 were first treated with magnetron sputtered NbN film and then only specimens of group T4 were treated with 120 microm blasted Al2O3 particles. The composition of the deposits were analyzed by X-ray diffraction (XRD). A universal testing machine was used to perform the three-point bending test to evaluate the bonding strength of Ti and porcelain. The microstructure of NbN, the interface of Ti-porcelain and the fractured Ti surface were observed with scanning electron microscopy (SEM) and energy depressive spectrum (EDS), and the results were compared. The XRD results showed that the NbN deposits were cubic crystalline phases. The bonding strength of Ti and porcelain in T1 to T4 group were (27.2+/-0.8), (43.1+/-0.6), (31.4+/-1.0) and (44.9+/-0.6) MPa. These results were analyzed by one-way analysis of variance and differences between groups were compared using least significant difference test. Significant inter-group differences were found among all groups (P<0.05). The results of SEM showed that with treatment of Al2O3 or NbN, alone, pre-cracks were found in the interface of Ti-porcelain, while samples treated with both Al2O3 and NbN had better bond. EDS of Ti-porcelain interface showed oxidation occurred in T1, T2 and T3, but was well controlled in T4. Magnetron sputtered NbN can prevent Ti from being oxidized, and can improve the bonding strength of Ti/Vita titankeramik system. Al2O3 blast can also improve the bonding strength of Ti/Vita titankeramik system.

Determining the sputter yields of molybdenum in low-index crystal planes via electron backscattered diffraction, focused ion beam and atomic force microscope

DOE Office of Scientific and Technical Information (OSTI.GOV)

Huang, H.S., E-mail: 160184@mail.csc.com.tw; Chiu, C.H.; Hong, I.T.

2013-09-15

Previous literature has used several monocrystalline sputtering targets with various crystalline planes, respectively, to investigate the variations of the sputter yield of materials in different crystalline orientations. This study presents a method to measure the sputtered yields of Mo for the three low-index planes (100), (110), and (111), through using an easily made polycrystalline target. The procedure was firstly to use electron backscattered diffraction to identify the grain positions of the three crystalline planes, and then use a focused ion beam to perform the micro-milling of each identified grain, and finally the sputter yields were calculated from the removed volumes,more » which were measured by atomic force microscope. Experimental results showed that the sputter yield of the primary orientations for Mo varied as Y{sub (110)} > Y{sub (100)} > Y{sub (111)}, coincidental with the ranking of their planar atomic packing densities. The concept of transparency of ion in the crystalline substance was applied to elucidate these results. In addition, the result of (110) orientation exhibiting higher sputter yield is helpful for us to develop a Mo target with a higher deposition rate for use in industry. By changing the deformation process from straight rolling to cross rolling, the (110) texture intensity of the Mo target was significantly improved, and thus enhanced the deposition rate. - Highlights: • We used EBSD, FIB and AFM to measure the sputter yields of Mo in low-index planes. • The sputter yield of the primary orientations for Mo varied as Y{sub (110)} > Y{sub (100)} > Y{sub (111)}. • The transparency of ion was used to elucidate the differences in the sputter yield. • We improved the sputter rate of polycrystalline Mo target by adjusting its texture.« less

Power accounting of plasma discharges in the linear device Proto-MPEX

NASA Astrophysics Data System (ADS)

Showers, M.; Piotrowicz, P. A.; Beers, C. J.; Biewer, T. M.; Caneses, J.; Canik, J.; Caughman, J. B. O.; Donovan, D. C.; Goulding, R. H.; Lumsdaine, A.; Kafle, N.; Owen, L. W.; Rapp, J.; Ray, H.

2018-06-01

Plasma material interaction (PMI) studies are crucial to the successful development of future fusion reactors. Prototype Material Plasma Exposure eXperiment (Proto-MPEX) is a prototype design for the MPEX, a steady-state linear device being developed to study PMI. The primary purpose of Proto-MPEX is developing the plasma heating source concepts for MPEX. A power accounting study of Proto-MPEX works to identify machine operating parameters that could improve its performance, thereby increasing its PMI research capabilities, potentially impacting the MPEX design concept. To build a comprehensive power balance, an analysis of the helicon region has been performed implementing a diagnostic suite and software modeling to identify mechanisms and locations of heat loss from the main plasma. Of the 106.3 kW of input power, up to 90.5% of the power has been accounted for in the helicon region. When the analysis was extended to encompass the device to its end plates, 49.2% of the input power was accounted for and verified diagnostically. Areas requiring further diagnostic analysis are identified. The required improvements will be implemented in future work. The data acquisition and analysis processes will be streamlined to form a working model for future power balance studies of Proto-MPEX. ).

Particle and heat flux estimates in Proto-MPEX in Helicon Mode with IR imaging

NASA Astrophysics Data System (ADS)

Showers, M. A.; Biewer, T. M.; Caughman, J. B. O.; Donovan, D. C.; Goulding, R. H.; Rapp, J.

2016-10-01

The Prototype Material Plasma Exposure eXperiment (Proto-MPEX) at Oak Ridge National Laboratory (ORNL) is a linear plasma device developing the plasma source concept for the Material Plasma Exposure eXperiment (MPEX), which will address plasma material interaction (PMI) science for future fusion reactors. To better understand how and where energy is being lost from the Proto-MPEX plasma during ``helicon mode'' operations, particle and heat fluxes are quantified at multiple locations along the machine length. Relevant diagnostics include infrared (IR) cameras, four double Langmuir probes (LPs), and in-vessel thermocouples (TCs). The IR cameras provide temperature measurements of Proto-MPEX's plasma-facing dump and target plates, located on either end of the machine. The change in surface temperature is measured over the duration of the plasma shot to determine the heat flux hitting the plates. The IR cameras additionally provide 2-D thermal load distribution images of these plates, highlighting Proto-MPEX plasma behaviors, such as hot spots. The LPs and TCs provide additional plasma measurements required to determine particle and heat fluxes. Quantifying axial variations in fluxes will help identify machine operating parameters that will improve Proto-MPEX's performance, increasing its PMI research capabilities. This work was supported by the U.S. D.O.E. contract DE-AC05-00OR22725.

Development of SSUBPIC code for modeling the neutral gas depletion effect in helicon discharges

NASA Astrophysics Data System (ADS)

Kollasch, Jeffrey; Sovenic, Carl; Schmitz, Oliver

2017-10-01

The SSUBPIC (steady-state unstructured-boundary particle-in-cell) code is being developed to model helicon plasma devices. The envisioned modeling framework incorporates (1) a kinetic neutral particle model, (2) a kinetic ion model, (3) a fluid electron model, and (4) an RF power deposition model. The models are loosely coupled and iterated until convergence to steady-state. Of the four required solvers, the kinetic ion and neutral particle simulation can now be done within the SSUBPIC code. Recent SSUBPIC modifications include implementation and testing of a Coulomb collision model (Lemons et al., JCP, 228(5), pp. 1391-1403) allowing efficient coupling of kineticly-treated ions to fluid electrons, and implementation of a neutral particle tracking mode with charge-exchange and electron impact ionization physics. These new simulation capabilities are demonstrated working independently and coupled to ``dummy'' profiles for RF power deposition to converge on steady-state plasma and neutral profiles. The geometry and conditions considered are similar to those of the MARIA experiment at UW-Madison. Initial results qualitatively show the expected neutral gas depletion effect in which neutrals in the plasma core are not replenished at a sufficient rate to sustain a higher plasma density. This work is funded by the NSF CAREER award PHY-1455210 and NSF Grant PHY-1206421.

Dynamics of Turbulence Suppression in a Helicon Plasma

NASA Astrophysics Data System (ADS)

Hayes, Tiffany; Gilmore, Mark

2012-10-01

Experiments are currently being conducted in the the Helicon-Cathode Device (HelCat) at the University of New Mexico. The goal is to the study in detail the transition from a turbulent to a non-turbulent state in the presence of flow shear. HelCat has intrinsic fluctuations that have been identified as drift-waves. Using simple electrode biasing, it has been found that these fluctuations can be completely suppressed. In some extreme cases, a different instability, possibly the Kelvin-Helmholtz instability, can be excited. Detailed studies are underway in order to understand the characteristics of each mode, and to elucidate the underlying physics that cause the change between an unstable plasma, and an instability-free plasma. Dynamics being observed include changes in flow profiles, both azimuthal and parallel, as well as changes in potential and temperature gradients. Further understanding is being sought using several computer codes developed at EPFL: a linear stability solver (LSS,footnotetextP. Ricci and B.N. Rogers (2009). Phys Plasmas 16, 062303. a one-dimensional PIC code/sheath solver, ODISEE,footnotetextJ. Loizu, P. Ricci, and C. Theiler (2011). Phys Rev E 83, 016406 and a global, 3D Braginski code, GBS.footnotetextRicci, Rogers (2009) A basic overview of results will be presented.

RFEA measurements of high-energy electrons in a helicon plasma device with expanding magnetic field

NASA Astrophysics Data System (ADS)

Gulbrandsen, Njål; Fredriksen, Åshild

2017-01-01

In the inductively coupled plasma of the Njord helicon device we have, for the same parameters as for which an ion beam exists, measured a downstream population of high-energy electrons emerging from the source. Separated measurements of energetic tail electrons was carried out by Retarding Field Energy Analyzer (RFEA) with a grounded entrance grid, operated in an electron collection mode. In a radial scan with the RFEA pointed toward the source, we found a significant population of high-energy electrons just inside the magnetic field line mapping to the edge of the source. A second peak in high-energy electrons density was observed in a radial position corresponding to the radius of the source. Also, throughout the main column a small contribution of high-energy electrons was observed. In a radial scan with a RFEA biased to collect ions a localized increase in the plasma ion density near the magnetic field line emerging from the plasma near the wall of the source was observed. This is interpreted as a signature of high-energy electrons ionizing the neutral gas. Also, a dip in the floating potential of a Langmuir probe is evident in this region where high-energy electrons is observed.

X-ray and Raman scattering study of orientational order in nematic and heliconical nematic liquid crystals.

PubMed

Singh, Gautam; Fu, Jinxin; Agra-Kooijman, Dena M; Song, Jang-Kun; Vengatesan, M R; Srinivasarao, Mohan; Fisch, Michael R; Kumar, Satyendra

2016-12-01

The temperature dependence of the orientational order parameters 〈P_{2}(cosβ)〉 and 〈P_{4}(cosβ)〉 in the nematic (N) and twist-bend nematic (N_{tb}) phases of the liquid crystal dimer CB7CB have been measured using x-ray and polarized Raman scattering. The 〈P_{2}(cosβ)〉 obtained from both techniques are the same, while 〈P_{4}(cosβ)〉, determined by Raman scattering is, as expected, systematically larger than its x-ray value. Both order parameters increase in the N phase with decreasing temperature, drop across the N-N_{tb} transition, and continue to decrease. In the N_{tb} phase, the x-ray value of 〈P_{4}(cosβ)〉 eventually becomes negative, providing a direct and independent confirmation of a conical molecular orientational distribution. The heliconical tilt angle α, determined from orientational distribution functions in the N_{tb} phase, increases to ∼24^{∘} at ∼15 K below the transition. In the N_{tb} phase, α(T)∝(T^{*}-T)^{λ}, with λ=0.19±0.03. The transition supercools by 1.7 K, consistent with its weakly first-order nature. The value of λ is close to 0.25 indicating close proximity to a tricritical point.

Variable Specific Impulse Magnetoplasma Rocket Engine

NASA Technical Reports Server (NTRS)

Chang-Diaz, Franklin R. (Inventor)

2002-01-01

An engine is disclosed, including a controllable output plasma generator, a controllable heater for selectably raising a temperature of the plasma connected to an outlet of the plasma generator, and a nozzle connected to an outlet of the heater, through which heated plasma is discharged to provide thrust. In one embodiment, the source of plasma is a helicon generator. In one embodiment, the heater is an ion cyclotron resonator. In one embodiment, the nozzle is a radially diverging magnetic field disposed on a discharge side of the heater so that helically travelling particles in the beater exit the heater at high axial velocity. A particular embodiment includes control circuits for selectably directing a portion of radio frequency power from an RF generator to the helicon generator and to the cyclotron resonator so that the thrust output and the specific impulse of the engine can be selectively controlled. A method of propelling a vehicle is also disclosed. The method includes generating a plasma, heating said plasma, and discharging the heated plasma through a nozzle. In one embodiment, the nozzle is a diverging magnetic field. In this embodiment, the heating is performed by applying a radio frequency electro magnetic field to the plasma at the ion cyclotron frequency in an axially polarized DC magnetic field.

Deposition of PTFE thin films by ion beam sputtering and a study of the ion bombardment effect

NASA Astrophysics Data System (ADS)

He, J. L.; Li, W. Z.; Wang, L. D.; Wang, J.; Li, H. D.

1998-02-01

Ion beam sputtering technique was employed to prepare thin films of Polytetrafluroethylene (PTFE). Simultaneous ion beam bombardment during film growth was also conducted in order to study the bombardment effects. Infrared absorption (IR), X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) analysis was used to evaluate the material's integrity. It was found that PTFE thin films could be grown at room temperature by direct sputtering of a PTFE target. The film's composition and structure were shown to be dependent on the sputtering energy. Films deposited by single sputtering at higher energy (˜1500 eV) were structurally quite similar to the original PTFE material. Simultaneous ion beam bombarding during film growth caused defluorination and structural changes. Mechanism for sputtering deposition of such a polymeric material is also discussed.

Mixed composition materials suitable for vacuum web sputter coating

NASA Technical Reports Server (NTRS)

Banks, Bruce A.; Rutledge, Sharon K.; Dever, Joyce A.; Bruckner, Eric J.; Walters, Patricia; Hambourger, Paul D.

1996-01-01

Ion beam sputter deposition techniques were used to investigate simultaneous sputter etching of two component targets so as to produce mixed composition films. Although sputter deposition has been largely confined to metals and metal oxides, at least one polymeric material, poly-tetra-fluorethylene, has been demonstrated to produce sputtered fragments which repolymerize upon deposition to produce a highly cross-linked fluoropolymer resembling that of the parent target Fluoropolymer-filled silicon dioxide and fluoropolymer-filled aluminum oxide coatings have been deposited by means of ion beam sputter coat deposition resulting in films having material properties suitable for aerospace and commercial applications. The addition of fluoropolymer to silicon dioxide films was found to increase the hydrophobicity of the resulting mixed films; however, adding fluoropolymer to aluminum oxide films resulted in a reduction in hydrophobicity, thought to be caused by aluminum fluoride formation.

Sputtered deposited nanocrystalline ZnO films: A correlation between electrical, optical and microstructural properties

NASA Astrophysics Data System (ADS)

Lee, J.; Gao, W.; Li, Z.; Hodgson, M.; Metson, J.; Gong, H.; Pal, U.

2005-05-01

Zinc oxide thin films were prepared by dc (direct current) and rf (radio frequency) magnetron sputtering on glass substrates. ZnO films produced by dc sputtering have a high resistance, while the films produced using rf sputtering are significantly more conductive. While the conductive films have a compact nodular surface morphology, the resistive films have a relatively porous surface with columnar structures in cross section. Compared to the dc sputtered films, rf sputtered films have a microstructure with smaller d spacing, lower internal stress, higher band gap energy and higher density. Dependence of conductivity on the deposition technique and the resulting d spacing , stress, density, band gap, film thickness and Al doping are discussed. Correlations between the electrical conductivity, microstructural parameters and optical properties of the films have been made.

Solar Wind Sputtering of Lunar Surface Materials: Role and Some Possible Implications of Potential Sputtering

NASA Technical Reports Server (NTRS)

Barghouty, A. F.; Adams, J. H., Jr.; Meyer, F.; Reinhold, c.

2010-01-01

Solar-wind induced sputtering of the lunar surface includes, in principle, both kinetic and potential sputtering. The role of the latter mechanism, however, in many focused studies has not been properly ascertained due partly to lack of data but can also be attributed to the assertion that the contribution of solar-wind heavy ions to the total sputtering is quite low due to their low number density compared to solar-wind protons. Limited laboratory measurements show marked enhancements in the sputter yields of slow-moving, highly-charged ions impacting oxides. Lunar surface sputtering yields are important as they affect, e.g., estimates of the compositional changes in the lunar surface, its erosion rate, as well as its contribution to the exosphere as well as estimates of hydrogen and water contents. Since the typical range of solar-wind ions at 1 keV/amu is comparable to the thickness of the amorphous rim found on lunar soil grains, i.e. few 10s nm, lunar simulant samples JSC-1A AGGL are specifically enhanced to have such rims in addition to the other known characteristics of the actual lunar soil particles. However, most, if not all laboratory studies of potential sputtering were carried out in single crystal targets, quite different from the rim s amorphous structure. The effect of this structural difference on the extent of potential sputtering has not, to our knowledge, been investigated to date.

Dust cloud evolution in sub-stellar atmospheres via plasma deposition and plasma sputtering

NASA Astrophysics Data System (ADS)

Stark, C. R.; Diver, D. A.

2018-04-01

Context. In contemporary sub-stellar model atmospheres, dust growth occurs through neutral gas-phase surface chemistry. Recently, there has been a growing body of theoretical and observational evidence suggesting that ionisation processes can also occur. As a result, atmospheres are populated by regions composed of plasma, gas and dust, and the consequent influence of plasma processes on dust evolution is enhanced. Aim. This paper aims to introduce a new model of dust growth and destruction in sub-stellar atmospheres via plasma deposition and plasma sputtering. Methods: Using example sub-stellar atmospheres from DRIFT-PHOENIX, we have compared plasma deposition and sputtering timescales to those from neutral gas-phase surface chemistry to ascertain their regimes of influence. We calculated the plasma sputtering yield and discuss the circumstances where plasma sputtering dominates over deposition. Results: Within the highest dust density cloud regions, plasma deposition and sputtering dominates over neutral gas-phase surface chemistry if the degree of ionisation is ≳10-4. Loosely bound grains with surface binding energies of the order of 0.1-1 eV are susceptible to destruction through plasma sputtering for feasible degrees of ionisation and electron temperatures; whereas, strong crystalline grains with binding energies of the order 10 eV are resistant to sputtering. Conclusions: The mathematical framework outlined sets the foundation for the inclusion of plasma deposition and plasma sputtering in global dust cloud formation models of sub-stellar atmospheres.