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Sample records for inductive plasma source

  1. Inductively generated streaming plasma ion source

    DOEpatents

    Glidden, Steven C.; Sanders, Howard D.; Greenly, John B.

    2006-07-25

    A novel pulsed, neutralized ion beam source is provided. The source uses pulsed inductive breakdown of neutral gas, and magnetic acceleration and control of the resulting plasma, to form a beam. The beam supplies ions for applications requiring excellent control of ion species, low remittance, high current density, and spatial uniformity.

  2. Resonant planar antenna as an inductive plasma source

    SciTech Connect

    Guittienne, Ph.; Lecoultre, S.; Howling, A. A.; Hollenstein, Ch.; Fayet, P.; Larrieu, J.

    2012-04-15

    A resonant planar antenna as an inductive plasma source operating at 13.56 MHz inside a low pressure vacuum vessel is presented for potential plasma processing applications. Its principle consists in interconnecting elementary resonant meshes composed of inductive and capacitive elements. Due to its structure, the antenna shows a set of resonant modes associated with peaks of the real input impedance. Each of these modes is defined by its own current and voltage distribution oscillating at the frequency of the mode. A rectangular antenna of 0.55mx0.20m has been built, and first results obtained with argon plasmas are presented. Plasma generation is shown to be efficient as densities up to 4{center_dot}10{sup 17}m{sup -3} at 2000 W have been measured by microwave interferometry at a distance of 4 cm from the source plane. It is also demonstrated that the plasma couples inductively with the resonating currents flowing in the antenna above a threshold power of about 60 W. A non-uniformity of less than {+-}5% is obtained at 1000 W at a few centimeters above the antenna over 75% of its surface.

  3. Three-Dimensional Electromagnetic Plasma Modeling of Inductively Coupled Plasma Source and Antenna

    NASA Astrophysics Data System (ADS)

    Rauf, Shahid; Agarwal, Ankur; Kenney, Jason; Wu, Ming-Feng; Collins, Ken

    2012-10-01

    Inductively coupled plasmas (ICP) are widely used for etching and deposition in the semiconductor industry. As device dimensions shrink with concomitant decreased tolerance for variability, it is critical to improve plasma and process uniformity in all plasma processes. In ICP systems, one of the major sources of non-uniformity is the radio-frequency (RF) antenna used to generate the electromagnetic wave. Discontinuities at current feed and grounding locations as well as electromagnetic field variations along the antenna coils can perturb the azimuthal electric field, resulting in a non-uniform plasma. For plasma modeling of ICP systems, a related problem is how capacitive coupling from the antenna is accounted for. ICP models have generally considered field variation along the antenna and capacitive coupling using simplified circuit models for the antenna structures. Modern ICP antennas are however quite complicated, making circuit approximations of the antenna too crude for system design. A three-dimensional parallel plasma model is described in this paper, where the full set of Maxwell equations are solved in conjunction with plasma transport equations for the plasma and the antenna. Several examples from the use of this model in ICP system design are presented.

  4. Plasma dynamics in a discharge produced by a pulsed dual frequency inductively coupled plasma source

    SciTech Connect

    Mishra, Anurag; Lee, Sehan; Yeom, Geun Y.

    2014-11-01

    Using a Langmuir probe, time resolved measurements of plasma parameters were carried out in a discharge produced by a pulsed dual frequency inductively coupled plasma source. The discharge was sustained in an argon gas environment at a pressure of 10 mTorr. The low frequency (P{sub 2} {sub MHz}) was pulsed at 1 kHz and a duty ratio of 50%, while high frequency (P{sub 13.56} {sub MHz}) was maintained in the CW mode. All measurements were carried out at the center of the discharge and 20 mm above the substrate. The results show that, at a particular condition (P{sub 2} {sub MHz} = 200 W and P{sub 13.56} {sub MHz }= 600 W), plasma density increases with time and stabilizes at up to ∼200 μs after the initiation of P{sub 2} {sub MHz} pulse at a plasma density of (2 × 10{sup 17} m{sup −3}) for the remaining duration of pulse “on.” This stabilization time for plasma density increases with increasing P{sub 2} {sub MHz} and becomes ∼300 μs when P{sub 2} {sub MHz} is 600 W; however, the growth rate of plasma density is almost independent of P{sub 2} {sub MHz}. Interestingly, the plasma density sharply increases as the pulse is switched off and reaches a peak value in ∼10 μs, then decreases for the remaining pulse “off-time.” This phenomenon is thought to be due to the sheath modulation during the transition from “pulse on” to “pulse off” and partly due to RF noise during the transition period. The magnitude of peak plasma density in off time increases with increasing P{sub 2} {sub MHz}. The plasma potential and electron temperature decrease as the pulse develops and shows similar behavior to that of the plasma density when the pulse is switched off.

  5. On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

    SciTech Connect

    Lee, Jin-Won; Lee, Yun-Seong Chang, Hong-Young; An, Sang-Hyuk

    2014-08-15

    In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

  6. On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes

    NASA Astrophysics Data System (ADS)

    Lee, Jin-Won; Lee, Yun-Seong; Chang, Hong-Young; An, Sang-Hyuk

    2014-08-01

    In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

  7. Investigation of large-area multicoil inductively coupled plasma sources using three-dimensional fluid model

    NASA Astrophysics Data System (ADS)

    Brcka, Jozef

    2016-07-01

    A multi inductively coupled plasma (ICP) system can be used to maintain the plasma uniformity and increase the area processed by a high-density plasma. This article presents a source in two different configurations. The distributed planar multi ICP (DM-ICP) source comprises individual ICP sources that are not overlapped and produce plasma independently. Mutual coupling of the ICPs may affect the distribution of the produced plasma. The integrated multicoil ICP (IMC-ICP) source consists of four low-inductance ICP antennas that are superimposed in an azimuthal manner. The identical geometry of the ICP coils was assumed in this work. Both configurations have highly asymmetric components. A three-dimensional (3D) plasma model of the multicoil ICP configurations with asymmetric features is used to investigate the plasma characteristics in a large chamber and the operation of the sources in inert and reactive gases. The feasibility of the computational calculation, the speed, and the computational resources of the coupled multiphysics solver are investigated in the framework of a large realistic geometry and complex reaction processes. It was determined that additional variables can be used to control large-area plasmas. Both configurations can form a plasma, that azimuthally moves in a controlled manner, the so-called “sweeping mode” (SM) or “polyphase mode” (PPM), and thus they have the potential for large-area and high-density plasma applications. The operation in the azimuthal mode has the potential to adjust the plasma distribution, the reaction chemistry, and increase or modulate the production of the radicals. The intrinsic asymmetry of the individual coils and their combined operation were investigated within a source assembly primarily in argon and CO gases. Limited investigations were also performed on operation in CH4 gas. The plasma parameters and the resulting chemistry are affected by the geometrical relation between individual antennas. The aim of

  8. W and WC layers deposition by shielded inductively coupled plasma source

    NASA Astrophysics Data System (ADS)

    Colpo, P.; Meziani, T.; Sauvageot, P.; Ceccone, G.; Gibson, P. N.; Rossi, F.; Monge-Cadet, P.

    2002-09-01

    Tungsten and carbon tungsten films have been deposited by a plasma enhanced chemical vapor deposition (PECVD) technique. The plasma-assisted deposition was performed by inductively coupled plasma source (ICP). A Faraday shield was arranged within the plasma chamber to prevent electrically conductive film deposition on the dielectric chamber wall that would screen the electromagnetic field. External electrical parameters and ion densities of the shielded inductive plasma source are measured and compared to classical ICPs source characteristics. Tungsten deposition has been performed from WF6 diluted in argon and hydrogen. A deposition rate of 5 mum/h was obtained. Hardness measurements show that the tungsten hardness can be increased from 5 to 20 GPA by biasing the substrate. WC films were deposited by adding methane or acetylene to the WF6/H2 mixture. The hardness of the WC films depends strongly on the methane or acetylene flow rate, i.e., on the film carbon content. The WC hardness has been correlated to the crystallographic structure. The first hardness maximum peak corresponds to a solid solution of carbon in the tungsten. Correlation between the deposition parameters, such as the gas composition, dc bias and coating properties has been investigated by means of AES, XRD, and nanoindentation analysis. copyright 2002 American Vacuum Society.

  9. Evolution of plasma parameters in a He - N2/Ar magnetic pole enhanced inductive plasma source

    NASA Astrophysics Data System (ADS)

    Younus, Maria; Rehman, N. U.; Shafiq, M.; Zakaullah, M.; Abrar, M.

    2016-02-01

    A magnetic pole enhanced inductively coupled H e - N2/A r plasma is studied at low pressure, to monitor the effects of helium mixing on plasma parameters like electron number density (ne) , electron temperature (Te) , plasma potential (Vp ) , and electron energy probability functions (EEPFs). An RF compensated Langmuir probe is employed to measure these plasma parameters. It is noted that electron number density increases with increasing RF power and helium concentration in the mixture, while it decreases with increase in filling gas pressure. On the other hand, electron temperature shows an increasing trend with helium concentration in the mixture. At low RF powers and low helium concentration in the mixture, EEPFs show a "bi-Maxwellian" distribution with pressure. While at RF powers greater than 50 W and higher helium concentration in the mixture, EEPFs evolve into "Maxwellian" distribution. The variation of skin depth with RF power and helium concentration in the mixture, and its relation with EEPF are also studied. The effect of helium concentrations on the temperatures of two electron groups ( Tb u l k and Tt a i l ) in the "bi-Maxwellian" EEPFs is also observed. The temperature of low energy electron group ( Tb u l k) shows significant increase with helium addition, while the temperature of tail electrons ( Tt a i l) increases smoothly as compared to ( Tb u l k).

  10. Parametric study of compound semiconductor etching utilizing inductively coupled plasma source

    SciTech Connect

    Constantine, C.; Johnson, D.; Barratt, C.

    1996-07-01

    Inductively Coupled Plasma (ICP) sources are extremely promising for large-area, high-ion density etching or deposition processes. In this review the authors compare results for GaAs and GaN etching with both ICP and Electron Cyclotron Resonance (ECR) sources on the same single-wafer platform. The ICP is shown to be capable of very high rates with excellent anisotropy for fabrication of GaAs vias or deep mesas in GaAs or GaN waveguide structures.

  11. Pulsed, Inductively Generated, Streaming Plasma Ion Source for Heavy Ion Fusion Linacs

    SciTech Connect

    Steven C. Glidden; Howard D Sanders; John B. Greenly; Daniel L. Dongwoo

    2006-04-28

    This report describes a compact, high current density, pulsed ion source, based on electrodeless, inductively driven gas breakdown, developed to meet the requirements on normalized emittance, current density, uniformity and pulse duration for an ion injector in a heavy-ion fusion driver. The plasma source produces >10 μs pulse of Argon plasma with ion current densities >100 mA/cm2 at 30 cm from the source and with strongly axially directed ion energy of about 80 eV, and sub-eV transverse temperature. The source has good reproducibility and spatial uniformity. Control of the current density during the pulse has been demonstrated with a novel modulator coil method which allows attenuation of the ion current density without significantly affecting the beam quality. This project was carried out in two phases. Phase 1 used source configurations adapted from light ion sources to demonstrate the feasibility of the concept. In Phase 2 the performance of the source was enhanced and quantified in greater detail, a modulator for controlling the pulse shape was developed, and experiments were conducted with the ions accelerated to >40 kV.

  12. Neutralization efficiency estimation in a neutral beam source based on inductively coupled plasma

    SciTech Connect

    Vozniy, O. V.; Yeom, G. Y.

    2009-01-01

    This study examined the optimal conditions of neutral beam generation to maintain a high degree of neutralization and focusing during beam energy variation for a neutral beam source based on inductively coupled plasma with a three-grid ion beam acceleration system. The neutral beam energy distribution was estimated by measuring the energy profiles of ions that 'survived' the neutralization after reflection. The energy measurements of the primary and reflected ions showed narrow distribution functions, each with only one peak. At higher beam energies, both the ratio of the ion energy loss to the primary energy and the degree of energy divergence decreased, confirming the precise alignment of the neutral beam. The neutralization efficiency of the neutral beam source with a three-grid acceleration system was found to be affected mainly by the beam angle divergence rather than by the particle translation energy.

  13. Optical measurements of helicon, inductive and capacitive RF discharges effects in ECR plasma sources

    NASA Astrophysics Data System (ADS)

    Bozduman, Ferhat; Gulec, Ali; Teke, Erdogan; Oksuz, Lutfi; Hala, Ahmed M.; Uygun Oksuz, Aysegul; Kiristi, Melek

    2013-10-01

    Low pressure argon plasma was produced by using Rf and ECR simultaneously. 2.45 GHz magnetron and for magnetic field permanent magnets were used for ECR plasma system. ECR-Helicon, ECR-Inductive, ECR-Capacitive plasmas were obtained by 13.56 MHz Rf power. Optical emission spectrums were taken. The plasma electron densities and temperatures will be calculated. Spatial and temporal evolution of plasmas will be investigated by an ICCD camera. A thermocouple will be inserted into the plasma for measurement of plasma gas temperature. Comparisons for three configurations will be given.

  14. Osmium isotopic ratio measurements by inductively coupled plasma source mass spectrometry

    SciTech Connect

    Russ, G.P. III; Bazan, J.M.; Date, A.R.

    1987-04-01

    The isotopic composition of nanogram quantities of osmium was measured by using an inductively coupled plasma source mass spectrometer. Sensitivity was enhanced a factor of approx.100 by the use of an osmium tetraoxide vapor generator rather than nebulization of solution. For samples less than or equal to5 ng, the ratios /sup 190/Os//sup 192/Os, /sup 189/Os//sup 192/Os, and /sup 188/Os//sup 192/Os were determined to better than +/- 0.5% (1sigma/sub m/) precision. For the minor isotopes, the ratios /sup 187/Os//sup 192/Os and /sup 186/Os//sup 192/Os were determined to +/-1%, and /sup 184/Os//sup 192/Os (4 x 10/sup -4/) was determined to approx.10%. Isotope ratios for common osmium are reported.

  15. 200-mm-diameter neutral beam source based on inductively coupled plasma etcher and silicon etching

    SciTech Connect

    Kubota, Tomohiro; Nukaga, Osamu; Ueki, Shinji; Sugiyama, Masakazu; Inamoto, Yoshimasa; Ohtake, Hiroto; Samukawa, Seiji

    2010-09-15

    The authors developed a neutral beam source consisting of a 200-mm-diameter inductively coupled plasma etcher and a graphite neutralization aperture plate based on the design of a neutral beam source that Samukawa et al. [Jpn. J. Appl. Phys., Part 2 40, L779 (2001)] developed. They measured flux and energy of neutral particles, ions, and photons using a silicon wafer with a thermocouple and a Faraday cup and calculated the neutralization efficiency. An Ar neutral beam flux of more than 1 mA/cm{sup 2} in equivalent current density and a neutralization efficiency of more than 99% were obtained. The spatial uniformity of the neutral beam flux was within {+-}6% within a 100 mm diameter. Silicon etching using a F{sub 2}-based neutral beam was done at an etch rate of about 47 nm/min, while Cl{sub 2}-based neutral beam realized completely no undercut. The uniformity of etch rate was less than {+-}5% within the area. The etch rate increased by applying bias power to the neutralization aperture plate, which shows that accelerated neutral beam was successfully obtained. These results indicate that the neutral beam source is scalable, making it possible to obtain a large-diameter and uniform neutral beam, which is inevitable for application to mass production.

  16. Inductively-Coupled RF Powered O2 Plasma as a Sterilization Source

    NASA Technical Reports Server (NTRS)

    Sharma, S. P.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Mogul, R.; Khare, B.; Chan, S. L.; Arnold, James O. (Technical Monitor)

    2001-01-01

    Low-temperature or cold plasmas have been shown to be effective for the sterilization of sensitive medical devices and electronic equipment. Low-temperature plasma sterilization procedures possess certain advantages over other protocols such as ethylene oxide, gamma radiation, and heat due to the use of inexpensive reagents, the insignificant environmental impacts and the low energy requirements. In addition, plasmas may also be more efficacious in the removal of robust microorganisms due to their higher chemical reactivity. Together, these attributes render cold plasma sterilization as ideal for the surface decontamination requirements for NASA Planetary Protection. Hence, the work described in this study involves the construction, characterization, and application of an inductively-coupled, RF powered oxygen (O2) plasma.

  17. Recent developments in inductively coupled plasma source magnetic sector multiple collector mass spectrometry

    NASA Astrophysics Data System (ADS)

    Halliday, A. N.; Lee, Der-Chuen; Christensen, J. C.; Jones, C. E.; Hall, C. M.; Yi, Wen; Teagle, D.; Walder, A. J.

    This paper describes advances in isotopic measurements that have been made with an inductively coupled plasma source magnetic sector multiple collector mass spectrometer and presents results of new experiments aimed at further evaluating the instrument's capability. It is shown using standard solutions that trace element ratios such as Rb/Sr can be measured precisely without isotope dilution by comparison with reference solutions of known composition. Similarly, using a new wide flight tube, Pb isotopic compositions and U/Pb ratios can be accurately measured simultaneously without isotope dilution. The effects of deliberately inducing changes in the running conditions (RF power) are shown to be significant for measuring trace element ratios but not for mass bias and interference corrected isotopic compositions. Finally, it is demonstrated that precise and accurate isotopic compositions of elements as refractory as W can be determined relatively easily by solution nebulization and even by direct laser ablation of complex silicates. Isobaric interferences in such experiments are negligible. These experiments serve to highlight the remarkable potential that this new field offers for hitherto difficult isotopic measurements in nuclear, earth, environmental and medical sciences. Isotopic measurements can be made that are reproducible at high precision through a range of running conditions, even in the presence of isobaric interferences. The ability to correct for mass discrimination accurately using a second element of similar mass, the very high sensitivity for elements that are otherwise difficult to ionize, the demonstrated capability for laser ablation work and the ability to measure through a wide mass range simultaneously give this instrument major advantages over other more traditional techniques of isotopic measurement.

  18. Recent developments in inductively coupled plasma source magnetic sector multiple collector mass spectrometry

    SciTech Connect

    Halliday, A.N.; Lee, Der-Chuen; Christensen, J.C.; Jones, C.E.; Hall, C.M.; Yi, Wen; Teagle, D.; Walder, A.J.; Freedman, P.A.

    1994-11-01

    This paper describes advances in isotopic measurements that have been made with an inductively coupled plasma source magnetic sector multiple collector mass spectrometer and presents results of new experiments aimed at further evaluating the instrument`s capability. It is shown using standard solutions that trace element ratios such as Rb/Sr can be measured precisely without isotope dilution by comparison with reference solutions of known composition. Similarly, using a new wide flight tube, Pb isotopic compositions and U/Pb ratios can be accurately measured simultaneously without isotope dilution. The effects of deliberately inducing changes in the running conditions (RF power) are shown to be significant for measuring trace element ratios but not for mass bias and interference corrected isotopic compositions. Finally, it is demonstrated that precise and accurate isotopic compositions of elements as refractory as W can be determined relatively easily by solution nebulization and even by direct laser ablation of complex silicates. Isobaric interferences in such experiments are negligible. These experiments serve to highlight the remarkable potential that this new field offers for hitherto difficult isotopic measurements in nuclear, earth, environmental and medical sciences. Isotopic measurements can be made that are reproducible at high precision through a range of running conditions, even in the presence of isobaric interferences. The ability to correct for mass discrimination accurately using a second element of similar mass, the very high sensitivity for elements that are otherwise difficult to ionize, the demonstrated capability for laser ablation work and the ability to measure through a wide mass range simultaneously give this instrument major advantages over other more traditional techniques of isotopic measurement.

  19. Induction plasma tube

    DOEpatents

    Hull, D.E.

    1982-07-02

    An induction plasma tube having a segmented, fluid-cooled internal radiation shield is disclosed. The individual segments are thick in cross-section such that the shield occupies a substantial fraction of the internal volume of the plasma enclosure, resulting in improved performance and higher sustainable plasma temperatures. The individual segments of the shield are preferably cooled by means of a counterflow fluid cooling system wherein each segment includes a central bore and a fluid supply tube extending into the bore. The counterflow cooling system results in improved cooling of the individual segments and also permits use of relatively larger shield segments which permit improved electromagnetic coupling between the induction coil and a plasma located inside the shield. Four embodiments of the invention, each having particular advantages, are disclosed.

  20. Induction plasma tube

    DOEpatents

    Hull, Donald E.

    1984-01-01

    An induction plasma tube having a segmented, fluid-cooled internal radiation shield is disclosed. The individual segments are thick in cross-section such that the shield occupies a substantial fraction of the internal volume of the plasma enclosure, resulting in improved performance and higher sustainable plasma temperatures. The individual segments of the shield are preferably cooled by means of a counterflow fluid cooling system wherein each segment includes a central bore and a fluid supply tube extending into the bore. The counterflow cooling system results in improved cooling of the individual segments and also permits use of relatively larger shield segments which permit improved electromagnetic coupling between the induction coil and a plasma located inside the shield. Four embodiments of the invention, each having particular advantages, are disclosed.

  1. Observation of helicon wave with m = 0 antenna in a weakly magnetized inductively coupled plasma source

    NASA Astrophysics Data System (ADS)

    Ellingboe, Bert; Sirse, Nishant; Moloney, Rachel; McCarthy, John

    2015-09-01

    Bounded whistler wave, called ``helicon wave,'' is known to produce high-density plasmas and has been exploited as a high density plasma source for many applications, including electric propulsion for spacecraft. In a helicon plasma source, an antenna wrapped around the magnetized plasma column launches a low frequency wave, ωce/2 >ωhelicon >ωce/100, in the plasma which is responsible for maintaining high density plasma. Several antenna designs have been proposed in order to match efficiently the wave modes. In our experiment, helicon wave mode is observed using an m = 0 antenna. A floating B dot probe, compensated to the capacitively coupled E field, is employed to measure axial-wave-field-profiles (z, r, and θ components) in the plasma at multiple radial positions as a function of rf power and pressure. The Bθ component of the rf-field is observed to be unaffected as the wave propagates in the axial direction. Power coupling between the antenna and the plasma column is identified and agrees with the E, H, and wave coupling regimes previously seen in M =1 antenna systems. That is, the Bz component of the rf-field is observed at low plasma density as the Bz component from the antenna penetrates the plasma. The Bz component becomes very small at medium density due to shielding at the centre of the plasma column; however, with increasing density, a sudden ``jump'' occurs in the Bz component above which a standing wave under the antenna with a propagating wave away from the antenna are observed.

  2. Online tuning of impedance matching circuit for long pulse inductively coupled plasma source operation—An alternate approach

    SciTech Connect

    Sudhir, Dass; Bandyopadhyay, M. Chakraborty, A.; Kraus, W.; Gahlaut, A.; Bansal, G.

    2014-01-15

    Impedance matching circuit between radio frequency (RF) generator and the plasma load, placed between them, determines the RF power transfer from RF generator to the plasma load. The impedance of plasma load depends on the plasma parameters through skin depth and plasma conductivity or resistivity. Therefore, for long pulse operation of inductively coupled plasmas, particularly for high power (∼100 kW or more) where plasma load condition may vary due to different reasons (e.g., pressure, power, and thermal), online tuning of impedance matching circuit is necessary through feedback. In fusion grade ion source operation, such online methodology through feedback is not present but offline remote tuning by adjusting the matching circuit capacitors and tuning the driving frequency of the RF generator between the ion source operation pulses is envisaged. The present model is an approach for remote impedance tuning methodology for long pulse operation and corresponding online impedance matching algorithm based on RF coil antenna current measurement or coil antenna calorimetric measurement may be useful in this regard.

  3. Electron energy distributions and electron impact source functions in Ar/N{sub 2} inductively coupled plasmas using pulsed power

    SciTech Connect

    Logue, Michael D. Kushner, Mark J.

    2015-01-28

    In plasma materials processing, such as plasma etching, control of the time-averaged electron energy distributions (EEDs) in the plasma allows for control of the time-averaged electron impact source functions of reactive species in the plasma and their fluxes to surfaces. One potential method for refining the control of EEDs is through the use of pulsed power. Inductively coupled plasmas (ICPs) are attractive for using pulsed power in this manner because the EEDs are dominantly controlled by the ICP power as opposed to the bias power applied to the substrate. In this paper, we discuss results from a computational investigation of EEDs and electron impact source functions in low pressure (5–50 mTorr) ICPs sustained in Ar/N{sub 2} for various duty cycles. We find there is an ability to control EEDs, and thus source functions, by pulsing the ICP power, with the greatest variability of the EEDs located within the skin depth of the electromagnetic field. The transit time of hot electrons produced in the skin depth at the onset of pulse power produces a delay in the response of the EEDs as a function of distance from the coils. The choice of ICP pressure has a large impact on the dynamics of the EEDs, whereas duty cycle has a small influence on time-averaged EEDs and source functions.

  4. An argon-nitrogen-hydrogen mixed-gas plasma as a robust ionization source for inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Makonnen, Yoseif; Beauchemin, Diane

    2014-09-01

    Multivariate optimization of an argon-nitrogen-hydrogen mixed-gas plasma for minimum matrix effects, while maintaining analyte sensitivity as much as possible, was carried out in inductively coupled plasma mass spectrometry. In the presence of 0.1 M Na, the 33.9 ± 3.9% (n = 13 elements) analyte signal suppression on average observed in an all-argon plasma was alleviated with the optimized mixed-gas plasma, the average being - 4.0 ± 8.8%, with enhancement in several cases. An addition of 2.3% v/v N2 in the outer plasma gas, and 0.50% v/v H2 to the central channel, as a sheath around the nebulizer gas flow, was sufficient for this drastic increase in robustness. It also reduced the background from ArO+ and Ar2+ as well as oxide levels by over an order of magnitude. On the other hand, the background from NO+ and ArN+ increased by up to an order of magnitude while the levels of doubly-charged ions increased to 7% (versus 2.7% in an argon plasma optimized for sensitivity). Furthermore, detection limits were generally degraded by 5 to 15 fold when using the mixed-gas plasma versus the argon plasma for matrix-free solution (although they were better for several elements in 0.1 M Na). Nonetheless, the drastically increased robustness allowed the direct quantitative multielement analysis of certified ore reference materials, as well as the determination of Mo and Cd in seawater, without using any matrix-matching or internal standardization.

  5. Continuum flow sampling mass spectrometer for elemental analysis with an inductively coupled plasma ion source

    SciTech Connect

    Olivares, J.A.

    1985-01-01

    The sampling of ions from an atmospheric pressure inductively coupled plasma for mass spectrometry (ICP-MS) with a supersonic nozzle and skimmer is shown to follow similar behavior found for neutral beam studies and of ion extraction from other plasmas and flames. The dependence of count rates for metal oxide and doubly charged ions on ICP operating parameters, and sampling interface configuration are discussed for this instrument. A simple method is described for the approximate measurement of the ion energy distribution in ICP-MS. The average ion kinetic energy, kinetic energy spread, and maximum kinetic energy are evaluated from a plot of ion signal as a function of retarding voltage applied to the quadrupole mass analyzer. The effects of plasma operating parameters on ion signals and energies are described. The interference on the ionization of cobalt by five salts, NaCl, MgCl/sub 2/, NH/sub 4/I, NH/sub 4/Br and NH/sub 4/Cl, in an ICP is first considered theoretically and subsequently the theoretical trends are established experimentally by ICP-MS. The interference trends are found to be in the order of the most easily ionized element in the matrix salt, i.e., Na > Mg > I > Br > Cl.

  6. High-power, low-pressure, inductively coupled RF plasma source using a FET-based inverter power supply

    NASA Astrophysics Data System (ADS)

    Komizunai, Shota; Oikawa, Kohei; Saito, Yuta; Takahashi, Kazunori; Ando, Akira

    2015-01-01

    A high-density plasma of density greater than 1019 m-3 is successfully produced in 1.5 Pa argon by an inductively coupled RF discharge with a 70-mm-diameter source cavity, where a 10-turn water-cooled RF loop antenna is wound onto the source tube and an axial magnetic field of ˜70 G is applied by two solenoids to reduce plasma loss onto the source cavity. The RF antenna is powered from a frequency-tunable field-effect-transistor-based inverter power supply, which does not require variable capacitors to match the impedance, at a frequency of ˜350 kHz and the RF power can be increased up to ˜8 kW. It is also demonstrated that the source is operational with an axial magnetic field provided by permanent magnet (PM) arrays; then the density in the case of the PM arrays is higher than that in the case of the solenoids. The role of the magnetic filter downstream of the source tube is demonstrated; a radially uniform plasma density exceeding 1018 m-3 and an electron temperature of ˜1-2 eV are obtained at ˜100 mm downstream of the open exit of the source tube.

  7. Inductively driven surface-plasma negative ion source for N-NBI use (invited)

    NASA Astrophysics Data System (ADS)

    Belchenko, Yu.; Abdrashitov, G.; Deichuli, P.; Ivanov, A.; Gorbovsky, A.; Kondakov, A.; Sanin, A.; Sotnikov, O.; Shikhovtsev, I.

    2016-02-01

    The long-pulse surface-plasma source prototype is developed at Budker Institute of Nuclear Physics for negative-ion based neutral beam injector use. The essential source features are (1) an active temperature control of the ion-optical system electrodes by circulation of hot thermal fluid through the channels, drilled in the electrode bodies, (2) the concaved transverse magnetic field in the extraction and acceleration gaps, preventing the electrons trapping and avalanching, and (3) the directed cesium deposition via distribution tubes adjacent to the plasma grid periphery. The long term effect of cesium was obtained just with the single cesium deposition. The high voltage strength of ion-optical system electrodes was improved with actively heated electrodes. A stable H- beam with a current ˜1 A and energy 90 keV was routinely extracted and accelerated.

  8. Inductively driven surface-plasma negative ion source for N-NBI use (invited).

    PubMed

    Belchenko, Yu; Abdrashitov, G; Deichuli, P; Ivanov, A; Gorbovsky, A; Kondakov, A; Sanin, A; Sotnikov, O; Shikhovtsev, I

    2016-02-01

    The long-pulse surface-plasma source prototype is developed at Budker Institute of Nuclear Physics for negative-ion based neutral beam injector use. The essential source features are (1) an active temperature control of the ion-optical system electrodes by circulation of hot thermal fluid through the channels, drilled in the electrode bodies, (2) the concaved transverse magnetic field in the extraction and acceleration gaps, preventing the electrons trapping and avalanching, and (3) the directed cesium deposition via distribution tubes adjacent to the plasma grid periphery. The long term effect of cesium was obtained just with the single cesium deposition. The high voltage strength of ion-optical system electrodes was improved with actively heated electrodes. A stable H(-) beam with a current ∼1 A and energy 90 keV was routinely extracted and accelerated. PMID:26932044

  9. Battery-powered pulsed high density inductively coupled plasma source for pre-ionization in laboratory astrophysics experiments.

    PubMed

    Chaplin, Vernon H; Bellan, Paul M

    2015-07-01

    An electrically floating radiofrequency (RF) pre-ionization plasma source has been developed to enable neutral gas breakdown at lower pressures and to access new experimental regimes in the Caltech laboratory astrophysics experiments. The source uses a customized 13.56 MHz class D RF power amplifier that is powered by AA batteries, allowing it to safely float at 3-6 kV with the electrodes of the high voltage pulsed power experiments. The amplifier, which is capable of 3 kW output power in pulsed (<1 ms) operation, couples electrical energy to the plasma through an antenna external to the 1.1 cm radius discharge tube. By comparing the predictions of a global equilibrium discharge model with the measured scalings of plasma density with RF power input and axial magnetic field strength, we demonstrate that inductive coupling (rather than capacitive coupling or wave damping) is the dominant energy transfer mechanism. Peak ion densities exceeding 5 × 10(19) m(-3) in argon gas at 30 mTorr have been achieved with and without a background field. Installation of the pre-ionization source on a magnetohydrodynamically driven jet experiment reduced the breakdown time and jitter and allowed for the creation of hotter, faster argon plasma jets than was previously possible. PMID:26233382

  10. Battery-powered pulsed high density inductively coupled plasma source for pre-ionization in laboratory astrophysics experiments.

    PubMed

    Chaplin, Vernon H; Bellan, Paul M

    2015-07-01

    An electrically floating radiofrequency (RF) pre-ionization plasma source has been developed to enable neutral gas breakdown at lower pressures and to access new experimental regimes in the Caltech laboratory astrophysics experiments. The source uses a customized 13.56 MHz class D RF power amplifier that is powered by AA batteries, allowing it to safely float at 3-6 kV with the electrodes of the high voltage pulsed power experiments. The amplifier, which is capable of 3 kW output power in pulsed (<1 ms) operation, couples electrical energy to the plasma through an antenna external to the 1.1 cm radius discharge tube. By comparing the predictions of a global equilibrium discharge model with the measured scalings of plasma density with RF power input and axial magnetic field strength, we demonstrate that inductive coupling (rather than capacitive coupling or wave damping) is the dominant energy transfer mechanism. Peak ion densities exceeding 5 × 10(19) m(-3) in argon gas at 30 mTorr have been achieved with and without a background field. Installation of the pre-ionization source on a magnetohydrodynamically driven jet experiment reduced the breakdown time and jitter and allowed for the creation of hotter, faster argon plasma jets than was previously possible.

  11. Characterization of a Sealed Americium-Beryllium (AmBe) Source by Inductively Coupled Plasma Mass Spectrometry

    SciTech Connect

    James Sommers; Marcos Jimenez; Mary Adamic; Jeffrey Giglio; Kevin Carney

    2009-12-01

    Two Americium-Beryllium neutron sources were dismantled, sampled (sub-sampled) and analyzed via inductively coupled plasma mass spectrometry (ICP-MS). Characteristics such as “age” since purification, actinide content, trace metal content and inter and intra source composition were determined. The “age” since purification of the two sources was determined to be 25.0 and 25.4 years, respectively. The systematic errors in the “age” determination were ± 4 % 2s. The amount and isotopic composition of U and Pu varied substantially between the sub-samples of Source 2 (n=8). This may be due to the physical means of sub-sampling or the way the source was manufactured. Source 1 was much more consistent in terms of content and isotopic composition (n=3 sub-samples). The Be-Am ratio varied greatly between the two sources. Source 1 had an Am-Be ratio of 6.3 ± 52 % (1s). Source 2 had an Am-Be ratio of 9.81 ± 3.5 % (1s). In addition, the trace element content between the samples varied greatly. Significant differences were determined between Source 1 and 2 for Sc, Sr, Y, Zr, Mo, Ba and W.

  12. Investigation of a rf inductively coupled plasma ion source capable of highly uniform and collimated ion-beam generation

    SciTech Connect

    Kanarov, V.; Hayes, A.; Yevtukhov, R.; Kameyama, I.; Siegfried, D.; Waahlin, E.

    2006-03-15

    In accordance with advanced data storage device fabrication requirements, we have evaluated a new broad-beam rf ion source for ion beam etching and deposition application. This source utilizes a novel reentrant shaped plasma inductively coupled plasma generator for improved radial plasma density uniformity and a dynamic magnetic field for improved static etch uniformity. It has the capability of reproducibly generating extremely uniform ion beams from 500 to 1500 eV with divergence angle <3 deg. and high directionality [Kanarov et al. (patent pending)]. For a 150 mm diameter wafer, an etch uniformity of <1% {sigma}/mean in static condition or <0.5% with wafer rotation is obtained over an ion incident angle range of 0 deg. - 65 deg. Recently, we have investigated extending the operation of this source to the critical low energy range, 100-500 eV, required for fabricating thin film magnetic head sensors. It was found that, under optimum operating conditions, excellent static etch uniformity (1%-1.5% {sigma}/mean) could be obtained at high ion beam current densities, up to 0.5 mA/cm{sup 2}, over the entire low-energy range while still achieving low divergence angles (<5 deg.) and high beam directionality. The ion beam performance was consistent with results obtained by simulation and by experiment using a 19-hole array ion optic test stand with scanning ion probe [E. Waahlin (unpublished)]. In this article we will describe the design of the ion source and then present the experimental performance data including plasma density distribution measured by an array of flat Langmuir probes, beam divergence distribution obtained by a 'pepper-pot' etch measurement technique, and etching rate distributions.

  13. 3-dimensional Modeling of Electromagnetic and Physical Sources of Aziumuthal Nonuniformities in Inductively Coupled Plasmas for Deposition

    NASA Astrophysics Data System (ADS)

    Lu, Junqing; Keiter, Eric R.; Kushner, Mark J.

    1998-10-01

    Inductively Coupled Plasmas (ICPs) are being used for a variety of deposition processes for microelectronics fabrication. Of particular concern in scaling these devices to large areas is maintaining azimuthal symmetry of the reactant fluxes. Sources of nonuniformity may be physical (e.g., gas injection and side pumping) or electromagnetic (e.g., transmission line effects in the antennas). In this paper, a 3-dimensional plasma equipment model, HPEM-3D,(M. J. Kushner, J. Appl. Phys. v.82, 5312 (1997).) is used to investigate physical and electromagentic sources of azimuthal nonuniformities in deposition tools. An ionized metal physical vapor deposition (IMPVD) system will be investigated where transmission line effects in the coils produce an asymmetric plasma density. Long mean free path transport for sputtered neutrals and tensor conducitivities have been added to HPEM-3D to address this system. Since the coil generated ion flux drifts back to the target to sputter low ionization potential metal atoms, the asymmetry is reinforced by rapid ionization of the metal atoms.

  14. Inductively coupled helium plasma torch

    DOEpatents

    Montaser, Akbar; Chan, Shi-Kit; Van Hoven, Raymond L.

    1989-01-01

    An inductively coupled plasma torch including a base member, a plasma tube and a threaded insert member within the plasma tube for directing the plasma gas in a tangential flow pattern. The design of the torch eliminates the need for a separate coolant gas tube. The torch can be readily assembled and disassembled with a high degree of alignment accuracy.

  15. Inductively Coupled Plasma/Mass Spectrometric Isotopic Determination of Nuclear Wastes Sources Associated with Hanford Tank Leaks

    SciTech Connect

    Evans, John C.; Dresel, P. Evan; Farmer, Orville T.

    2007-11-01

    The subsurface distribution of a nuclear waste tank leak on the U.S. Department of Energy’s Hanford Site was sampled by slant drilling techniques in order to characterize the chemical and radiological characteristics of the leaked material and assess geochemical transport properties of hazardous constituents. Sediment core samples recovered from the borehole were subjected to distilled water and acid leaching procedures with the resulting leachates analyzed for isotopic and chemical signatures. High-sensitivity inductively coupled plasma/mass spectrometry (ICP/MS) techniques were used for determination of isotopic ratios for Cs, I, Mo. Analysis of the isotopic patterns of I and Mo combined with associated chemical data showed evidence for at least two separate intrusions of nuclear waste into the subsurface. Isotopic data for Cs was inconclusive with respect to a source attribution signature.

  16. Modulations of the plasma uniformity by low frequency sources in a large-area dual frequency inductively coupled plasma based on fluid simulations

    SciTech Connect

    Sun, Xiao-Yan; Zhang, Yu-Ru; Li, Xue-Chun; Wang, You-Nian

    2015-05-15

    As the wafer size increases, dual frequency (DF) inductively coupled plasma (ICP) sources have been proposed as an effective method to achieve large-area uniform plasma processing. A two-dimensional (2D) self-consistent fluid model, combined with an electromagnetic module, has been employed to investigate the influence of the low frequency (LF) source on the plasma radial uniformity in an argon DF discharge. When the DF antenna current is fixed at 10 A, the bulk plasma density decreases significantly with the LF due to the less efficient heating, and the best radial uniformity is obtained at 3.39 MHz. As the LF decreases to 2.26 MHz, the plasma density is characterized by an edge-high profile, and meanwhile the maximum of the electron temperature appears below the outer two-turn coil. Moreover, the axial ion flux at 3.39 MHz is rather uniform in the center region except at the radial edge of the substrate, where a higher ion flux is observed. When the inner five-turn coil frequency is fixed at 2.26 MHz, the plasma density profiles shift from edge-high over uniform to center-high as the LF coil current increases from 6 A to 18 A, and the best plasma uniformity is obtained at 14 A. In addition, the maximum of the electron temperature becomes lower with a second peak appears at the radial position of r = 9 cm at 18 A.

  17. Closed inductively coupled plasma cell

    DOEpatents

    Manning, Thomas J.; Palmer, Byron A.; Hof, Douglas E.

    1990-01-01

    A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy.

  18. Closed inductively coupled plasma cell

    DOEpatents

    Manning, T.J.; Palmer, B.A.; Hof, D.E.

    1990-11-06

    A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies is disclosed. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy. 1 fig.

  19. Distance-of-Flight Mass Spectrometry with IonCCD Detection and an Inductively Coupled Plasma Source

    NASA Astrophysics Data System (ADS)

    Dennis, Elise A.; Ray, Steven J.; Enke, Christie G.; Gundlach-Graham, Alexander W.; Barinaga, Charles J.; Koppenaal, David W.; Hieftje, Gary M.

    2016-03-01

    Distance-of-flight mass spectrometry (DOFMS) is demonstrated for the first time with a commercially available ion detector—the IonCCD camera. Because DOFMS is a velocity-based MS technique that provides spatially dispersive, simultaneous mass spectrometry, a position-sensitive ion detector is needed for mass-spectral collection. The IonCCD camera is a 5.1-cm long, 1-D array that is capable of simultaneous, multichannel ion detection along a focal plane, which makes it an attractive option for DOFMS. In the current study, the IonCCD camera is evaluated for DOFMS with an inductively coupled plasma (ICP) ionization source over a relatively short field-free mass-separation distance of 25.3-30.4 cm. The combination of ICP-DOFMS and the IonCCD detector results in a mass-spectral resolving power (FWHM) of approximately 900 and isotope-ratio precision equivalent to or slightly better than current ICP-TOFMS systems. The measured isotope-ratio precision in % relative standard deviation (%RSD) was ≥0.008%RSD for nonconsecutive isotopes at 10-ppm concentration (near the ion-signal saturation point) and ≥0.02%RSD for all isotopes at 1-ppm. Results of DOFMS with the IonCCD camera are also compared with those of two previously characterized detection setups.

  20. Reduction of plasma density in the Helicity Injected Torus with Steady Inductance experiment by using a helicon pre-ionization source.

    PubMed

    Hossack, Aaron C; Firman, Taylor; Jarboe, Thomas R; Prager, James R; Victor, Brian S; Wrobel, Jonathan S; Ziemba, Timothy

    2013-10-01

    A helicon based pre-ionization source has been developed and installed on the Helicity Injected Torus with Steady Inductance (HIT-SI) spheromak. The source initiates plasma breakdown by injecting impurity-free, unmagnetized plasma into the HIT-SI confinement volume. Typical helium spheromaks have electron density reduced from (2-3) × 10(19) m(-3) to 1 × 10(19) m(-3). Deuterium spheromak formation is possible with density as low as 2 × 10(18) m(-3). The source also enables HIT-SI to be operated with only one helicity injector at injector frequencies above 14.5 kHz. A theory explaining the physical mechanism driving the reduction of breakdown density is presented.

  1. Reduction of plasma density in the Helicity Injected Torus with Steady Inductance experiment by using a helicon pre-ionization source

    SciTech Connect

    Hossack, Aaron C.; Jarboe, Thomas R.; Victor, Brian S.; Firman, Taylor; Prager, James R.; Ziemba, Timothy; Wrobel, Jonathan S.

    2013-10-15

    A helicon based pre-ionization source has been developed and installed on the Helicity Injected Torus with Steady Inductance (HIT-SI) spheromak. The source initiates plasma breakdown by injecting impurity-free, unmagnetized plasma into the HIT-SI confinement volume. Typical helium spheromaks have electron density reduced from (2–3) × 10{sup 19} m{sup −3} to 1 × 10{sup 19} m{sup −3}. Deuterium spheromak formation is possible with density as low as 2 × 10{sup 18} m{sup −3}. The source also enables HIT-SI to be operated with only one helicity injector at injector frequencies above 14.5 kHz. A theory explaining the physical mechanism driving the reduction of breakdown density is presented.

  2. Investigation of the antimicrobial activity at safe levels for eukaryotic cells of a low power atmospheric pressure inductively coupled plasma source.

    PubMed

    Barbieri, Daniela; Boselli, Marco; Cavrini, Francesca; Colombo, Vittorio; Gherardi, Matteo; Landini, Maria Paola; Laurita, Romolo; Liguori, Anna; Stancampiano, Augusto

    2015-06-08

    Low power atmospheric pressure inductively coupled thermal plasma sources integrated with a quenching device (cold ICP) for the efficient production of biologically active agents have been recently developed for potential biomedical applications. In the present work, in vitro experiments aimed at assessing the decontamination potential of a cold ICP source were carried out on bacteria typically associated with chronic wounds and designed to represent a realistic wound environment; further in vitro experiments were performed to investigate the effects of plasma-irradiated physiological saline solution on eukaryotic cells viability. A thorough characterization of the plasma source and process, for what concerns ultraviolet (UV) radiation and nitric oxide production as well as the variation of pH and the generation of nitrates and nitrites in the treated liquid media, was carried out to garner fundamental insights that could help the interpretation of biological experiments. Direct plasma treatment of bacterial cells, performed at safe level of UV radiation, induces a relevant decontamination, both on agar plate and in physiological saline solution, after just 2 min of treatment. Furthermore, the indirect treatment of eukaryotic cells, carried out by covering them with physiological saline solution irradiated by plasma, in the same conditions selected for the direct treatment of bacterial cells does not show any noticeable adverse effect to their viability. Some considerations regarding the role of the UV radiation on the decontamination potential of bacterial cells and the viability of the eukaryotic ones will be presented. Moreover, the effects of pH variation, nitrate and nitrite concentrations of the plasma-irradiated physiological saline solution on the decontamination of bacterial suspension and on the viability of eukaryotic cells subjected to the indirect treatment will be discussed. The obtained results will be used to optimize the design of the ICP source

  3. Inductance of rf-wave-heated plasmas.

    PubMed

    Farshi, E; Todo, Y

    2003-03-14

    The inductance of rf-wave-heated plasmas is derived. This inductance represents the inductance of fast electrons located in a plateau during their acceleration due to electric field or deceleration due to collisions and electric field. This inductance has been calculated for small electric fields from the two-dimensional Fokker-Planck equation as the flux crossing the surface of critical energy mv(2)(ph)/2 in the velocity space. The new expression may be important for radio-frequency current drive ramp-up, current drive efficiency, current profile control, and so on in tokamaks. This inductance may be incorporated into transport codes that study plasma heating by rf waves.

  4. Titanium oxidation by rf inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Valencia-Alvarado, R.; de la Piedad-Beneitez, A.; López-Callejas, R.; Barocio, S. R.; Mercado-Cabrera, A.; Peña-Eguiluz, R.; Muñoz-Castro, A. E.; Rodríguez-Méndez, B. G.; de la Rosa-Vázquez, J. M.

    2014-05-01

    The development of titanium dioxide (TiO2) films in the rutile and anatase phases is reported. The films have been obtained from an implantation/diffusion and sputtering process of commercially pure titanium targets, carried out in up to 500 W plasmas. The experimental outcome is of particular interest, in the case of anatase, for atmospheric pollution degradation by photocatalysis and, as to the rutile phase, for the production of biomaterials required by prosthesis and implants. The reactor employed consists in a cylindrical pyrex-like glass vessel inductively coupled to a 13.56 MHz RF source. The process takes place at a 5×10-2 mbar pressure with the target samples being biased from 0 to -3000 V DC. The anatase phase films were obtained from sputtering the titanium targets over glass and silicon electrically floated substrates placed 2 cm away from the target. The rutile phase was obtained by implantation/diffusion on targets at about 700 °C. The plasma was developed from a 4:1 argon/oxygen mixture for ~5 hour processing periods. The target temperature was controlled by means of the bias voltage and the plasma source power. The obtained anatase phases did not require annealing after the plasma oxidation process. The characterization of the film samples was conducted by means of x-ray diffraction, scanning electron microscopy, x-ray photoelectron spectroscopy and Raman spectroscopy.

  5. Spatial variation of plasma parameters and ion acceleration in an inductive plasma system

    SciTech Connect

    Volynets, V.N.; Park, Wontaek; Tolmachev, Yu.N.; Pashkovsky, V.G.; Yoo, Jinwoo

    2006-02-15

    Plasma parameters of inductively coupled plasma system with an annular plasma source have been studied experimentally. At low pressures (about 1 mTorr), electron temperature inside the plasma source is rather high (8-13 eV) and is much greater than in the diffusion (main) chamber (4-5 eV). The plasma potential inside the source is also much higher than in the main chamber. There is a rapid drop of the electron temperature and plasma potential at the boundary between the plasma source and the main chamber. The drop of the plasma potential at the boundary (about 20 V) means the existence of a strong axial electric field, which retards the electrons inside the plasma source and accelerates the ions from the source into the main chamber. Measurements of ion energy distributions in the main chamber volume reveal the existence of ions with kinetic energies about 15 eV.

  6. Effect of N2O to C4F8/O2 on Global Warming during Silicon Nitride Plasma Enhanced Chemical Vapor Deposition (PECVD) Chamber Cleaning Using a Remote Inductively Coupled Plasma Source

    NASA Astrophysics Data System (ADS)

    Kim, Ji Hwang; Oh, Chang Hyun; Lee, Nae Eung; Yeom, Geun Young

    2002-12-01

    For the silicon nitride plasma enhanced chemical vapor deposition (PECVD) chamber cleaning, a remote inductively coupled plasma (ICP) source was used with C4F8/O2/N2O and the effects of N2O on the silicon nitride cleaning rates and global warming were investigated. By adding 5% of N2O to C4F8/O2, the cleaning rate comparable to that of optimized Ar/NF3 could be obtained. At the exhaust line, CF4, C4F8, NF3, etc. were detected and the significant decrease of million metric tons of carbon equivalent (MMTCE) observed by the addition of N2O to C4F8/O2 was due to the decrease of emitted CF4. The MMTCE for the optimized C4F8/O2/N2O was also similar to that for Ar/NF3 at the highest cleaning condition.

  7. Effects of RF inductively coupled plasma ion source on the microstructure and mechanical properties of Ti-Al-N nanocrystalline films

    NASA Astrophysics Data System (ADS)

    Li, Dongke; Xie, Wei; Zou, Changwei

    2016-04-01

    The effects of radio frequency inductively coupled plasma ion source (RF-ICPIS) powers on the properties of Ti-Al-N nanocrystalline films were explored. The results indicated the powers of ion source had great influences on elements contents of Ti1- x Al x N nanocrystalline films. However, for Ti-Al-N films deposited at 60 W with highest Al content, h-AlN phase appeared. With the increasing of RF-ICPIS powers, Al contents in the Ti1- x Al x N increased gradually which led to the decreased grain size and denser nanostructure. The TEM images indicated that all the Ti-Al-N films were nanocrystalline TiN embedded into an amorphous matrix. The hardness of films increased, while the friction coefficient decreased with the variation of RF-ICPIS powers. Maximum hardness of 34.7 GPa and minimum friction coefficient of 0.13 were obtained for Ti-Al-N films deposited at RF-ICPIS powers of 50 W. The introduction of RF-ICPIS significantly improved and enhanced the mechanical properties of Ti-Al-N films.

  8. Development of a novel low-flow ion source/sampling cone geometry for inductively coupled plasma mass spectrometry and application in hyphenated techniques

    NASA Astrophysics Data System (ADS)

    Pfeifer, Thorben; Janzen, Rasmus; Steingrobe, Tobias; Sperling, Michael; Franze, Bastian; Engelhard, Carsten; Buscher, Wolfgang

    2012-10-01

    A novel ion source/sampling cone device for inductively coupled plasma mass spectrometry (ICP-MS) especially operated in the hyphenated mode as a detection system coupled with different separation modules is presented. Its technical setup is described in detail. Its main feature is the very low total argon consumption of less than 1.5 L min- 1, leading to significant reduction of operational costs especially when time-consuming speciation analysis is performed. The figures of merit of the new system with respect to sensitivity, detection power, long-term stability and working range were explored. Despite the profound differences of argon consumption of the new system in comparison to the conventional ICP-MS system, many of the characteristic features of the conventional ICP-MS could be maintained to a great extent. To demonstrate the ion source's capabilities, it was used as an element-selective detector for gas (GC) and high performance liquid chromatography (HPLC) where organic compounds of mercury and cobalt, respectively, were separated and detected with the new low-flow ICP-MS detection system. The corresponding chromatograms are shown. The applicability for trace element analysis has been validated with the certified reference material NIST 1643e.

  9. Advances in induction-heated plasma torch technology

    NASA Technical Reports Server (NTRS)

    Poole, J. W.; Vogel, C. E.

    1972-01-01

    Continuing research has resulted in significant advances in induction-heated plasma torch technology which extend and enhance its potential for broad range of uses in chemical processing, materials development and testing, and development of large illumination sources. Summaries of these advances are briefly described.

  10. The study of helicon plasma source

    SciTech Connect

    Miao Tingting; Shang Yong; Zhao Hongwei; Liu Zhanwen; Sun Liangting; Zhang Xuezhen; Zhao Huanyu

    2010-02-15

    Helicon plasma source is known as efficient generator of uniform and high density plasma. A helicon plasma source was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10{sup 13} cm{sup -3} have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10{sup -3} Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.

  11. Inductively coupled plasma spectrometry: Noise characteristics of aerosols, application of generalized standard additions method, and Mach disk as an emission source

    SciTech Connect

    Shen, Luan

    1995-10-06

    This dissertation is focused on three problem areas in the performance of inductively coupled plasma (ICP) source. The noise characteristics of aerosols produced by ICP nebulizers are investigated. A laser beam is scattered by aerosol and detected by a photomultiplier tube and the noise amplitude spectrum of the scattered radiation is measured by a spectrum analyzer. Discrete frequency noise in the aerosol generated by a Meinhard nebulizer or a direct injection nebulizer is primarily caused by pulsation in the liquid flow from the pump. A Scott-type spray chamber suppresses white noise, while a conical, straight-pass spray chamber enhances white noise, relative to the noise seen from the primary aerosol. Simultaneous correction for both spectral interferences and matrix effects in ICP atomic emission spectrometry (AES) can be accomplished by using the generalized standard additions method (GSAM). Results obtained with the application of the GSAM to the Perkin-Elmer Optima 3000 ICP atomic emission spectrometer are presented. The echelle-based polychromator with segmented-array charge-coupled device detectors enables the direct, visual examination of the overlapping lines Cd (1) 228.802 nm and As (1) 228.812 nm. The slit translation capability allows a large number of data points to be sampled, therefore, the advantage of noise averaging is gained. An ICP is extracted into a small quartz vacuum chamber through a sampling orifice in a water-cooled copper plate. Optical emission from the Mach disk region is measured with a new type of echelle spectrometer equipped with two segmented-array charge-coupled-device detectors, with an effort to improve the detection limits for simultaneous multielement analysis by ICP-AES.

  12. Pulsed Plasma Electron Sources

    NASA Astrophysics Data System (ADS)

    Krasik, Yakov

    2008-11-01

    Pulsed (˜10-7 s) electron beams with high current density (>10^2 A/cm^2) are generated in diodes with electric field of E > 10^6 V/cm. The source of electrons in these diodes is explosive emission plasma, which limits pulse duration; in the case E < 10^5 V/cm this plasma is not uniform and there is a time delay in its formation. Thus, there is a continuous interest in research of electron sources which can be used for generation of uniform electron beams produced at E <= 10^5 V/cm. In the present report, several types of plasma electron source (PES) will be considered. The first type of PES is fiber-based cathodes, with and without CsI coating. The operation of these cathodes is governed by the formation of the flashover plasma which serves as a source of electrons. The second type of PES is the ferroelectric plasma source (FPS). The operation of FPS, characterized by the formation of dense surface flashover plasma is accompanied also by the generation of fast microparticles and energetic neutrals. The latter was explained by Coulomb micro-explosions of the ferroelectric surface due to an large time-varying electric field at the front of the expanding plasma. A short review of recent achievements in the operation of a multi-FPS-assisted hollow anode to generate a large area electron beam will be presented as well. Finally, parameters of the plasma produced by a multi-capillary cathode with FPS and velvet igniters will be discussed. Ya. E. Krasik, J. Z. Gleizer, D. Yarmolich, A. Krokhmal, V. Ts. Gurovich, S.Efimov, J. Felsteiner V. Bernshtam, and Yu. M. Saveliev, J. Appl. Phys. 98, 093308 (2005). Ya. E. Krasik, A. Dunaevsky, and J. Felsteiner, Phys. Plasmas 8, 2466 (2001). D. Yarmolich, V. Vekselman, V. Tz. Gurovich, and Ya. E. Krasik, Phys. Rev. Lett. 100, 075004 (2008). J. Z. Gleizer, Y. Hadas and Ya. E. Krasik, Europhysics Lett. 82, 55001 (2008).

  13. Starter for inductively coupled plasma tube

    DOEpatents

    Hull, Donald E.; Bieniewski, Thomas M.

    1988-01-01

    A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.

  14. Starter for inductively coupled plasma tube

    DOEpatents

    Hull, D.E.; Bieniewski, T.M.

    1988-08-23

    A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

  15. Circuit Model for Capacitive Coupling in Inductively Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Watanabe, M.; Shaw, D. M.; Collins, G. J.; Sugai, H.

    1998-10-01

    A crude circuit model has been developed to illustrate and account for capacitive coupling between the rf coil and the bulk plasma in a stove top inductively coupled plasma source. The circuit model is composed of three levels of capacitance: the dielectric window capacitance, sheath capacitance contiguous to the dielectric window, and the chamber to ground sheath capacitance. The model is verified by quantitative comparison with the measured rf plasma potential in the bulk plasma body, plasma feedstock gas (argon) pressures below 2 mTorr. At higher pressures above 5 mTorr, the measured results diverge from the circuit model due to the transition from a spatially uniform electron density throughout the bulk plasma at pressures less than 2 mTorr to a less spatially uniform electron density at pressures above 5 mTorr.

  16. Large area plasma source

    NASA Technical Reports Server (NTRS)

    Foster, John (Inventor); Patterson, Michael (Inventor)

    2008-01-01

    An all permanent magnet Electron Cyclotron Resonance, large diameter (e.g., 40 cm) plasma source suitable for ion/plasma processing or electric propulsion, is capable of producing uniform ion current densities at its exit plane at very low power (e.g., below 200 W), and is electrodeless to avoid sputtering or contamination issues. Microwave input power is efficiently coupled with an ionizing gas without using a dielectric microwave window and without developing a throat plasma by providing a ferromagnetic cylindrical chamber wall with a conical end narrowing to an axial entrance hole for microwaves supplied on-axis from an open-ended waveguide. Permanent magnet rings are attached inside the wall with alternating polarities against the wall. An entrance magnet ring surrounding the entrance hole has a ferromagnetic pole piece that extends into the chamber from the entrance hole to a continuing second face that extends radially across an inner pole of the entrance magnet ring.

  17. Pulsed Inductive Plasma Acceleration: Performance Optimization Criteria

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.

    2014-01-01

    Optimization criteria for pulsed inductive plasma acceleration are developed using an acceleration model consisting of a set of coupled circuit equations describing the time-varying current in the thruster and a one-dimensional momentum equation. The model is nondimensionalized, resulting in the identification of several scaling parameters that are varied to optimize the performance of the thruster. The analysis reveals the benefits of underdamped current waveforms and leads to a performance optimization criterion that requires the matching of the natural period of the discharge and the acceleration timescale imposed by the inertia of the working gas. In addition, the performance increases when a greater fraction of the propellant is initially located nearer to the inductive acceleration coil. While the dimensionless model uses a constant temperature formulation in calculating performance, the scaling parameters that yield the optimum performance are shown to be relatively invariant if a self-consistent description of energy in the plasma is instead used.

  18. Vacuum arc plasma thrusters with inductive energy storage driver

    NASA Technical Reports Server (NTRS)

    Schein, Jochen (Inventor); Gerhan, Andrew N. (Inventor); Woo, Robyn L. (Inventor); Au, Michael Y. (Inventor); Krishnan, Mahadevan (Inventor)

    2004-01-01

    An apparatus for producing a vacuum arc plasma source device using a low mass, compact inductive energy storage circuit powered by a low voltage DC supply acts as a vacuum arc plasma thruster. An inductor is charged through a switch, subsequently the switch is opened and a voltage spike of Ldi/dt is produced initiating plasma across a resistive path separating anode and cathode. The plasma is subsequently maintained by energy stored in the inductor. Plasma is produced from cathode material, which allows for any electrically conductive material to be used. A planar structure, a tubular structure, and a coaxial structure allow for consumption of cathode material feed and thereby long lifetime of the thruster for long durations of time.

  19. Thyristor stack for pulsed inductive plasma generation.

    PubMed

    Teske, C; Jacoby, J; Schweizer, W; Wiechula, J

    2009-03-01

    A thyristor stack for pulsed inductive plasma generation has been developed and tested. The stack design includes a free wheeling diode assembly for current reversal. Triggering of the device is achieved by a high side biased, self supplied gate driver unit using gating energy derived from a local snubber network. The structure guarantees a hard firing gate pulse for the required high dI/dt application. A single fiber optic command is needed to achieve a simultaneous turn on of the thyristors. The stack assembly is used for switching a series resonant circuit with a ringing frequency of 30 kHz. In the prototype pulsed power system described here an inductive discharge has been generated with a pulse duration of 120 micros and a pulse energy of 50 J. A maximum power transfer efficiency of 84% and a peak power of 480 kW inside the discharge were achieved. System tests were performed with a purely inductive load and an inductively generated plasma acting as a load through transformer action at a voltage level of 4.1 kV, a peak current of 5 kA, and a current switching rate of 1 kA/micros. PMID:19334940

  20. Thyristor stack for pulsed inductive plasma generation.

    PubMed

    Teske, C; Jacoby, J; Schweizer, W; Wiechula, J

    2009-03-01

    A thyristor stack for pulsed inductive plasma generation has been developed and tested. The stack design includes a free wheeling diode assembly for current reversal. Triggering of the device is achieved by a high side biased, self supplied gate driver unit using gating energy derived from a local snubber network. The structure guarantees a hard firing gate pulse for the required high dI/dt application. A single fiber optic command is needed to achieve a simultaneous turn on of the thyristors. The stack assembly is used for switching a series resonant circuit with a ringing frequency of 30 kHz. In the prototype pulsed power system described here an inductive discharge has been generated with a pulse duration of 120 micros and a pulse energy of 50 J. A maximum power transfer efficiency of 84% and a peak power of 480 kW inside the discharge were achieved. System tests were performed with a purely inductive load and an inductively generated plasma acting as a load through transformer action at a voltage level of 4.1 kV, a peak current of 5 kA, and a current switching rate of 1 kA/micros.

  1. Recouping etch rates in pulsed inductively coupled plasmas

    SciTech Connect

    Agarwal, Ankur; Stout, Phillip J.; Banna, Samer; Rauf, Shahid; Collins, Ken

    2011-01-15

    Pulsed rf plasmas are increasingly being employed for plasma etching at future technological nodes. Although the plasma uniformity usually improves with pulsing, the lower time-averaged power decreases the etch rate and the lower throughput is undesirable. It is therefore important to evaluate different strategies to restore higher etch rates while retaining the advantages of pulsed plasmas. In this work, the impact of varying pulsing modes in an inductively coupled plasma on plasma characteristics and feature profile evolution are discussed using the results from a two-dimensional reactor scale plasma model coupled to a Monte Carlo based feature profile model. Results are discussed for poly-Si etching in an Ar/Cl{sub 2} gas mixture. The consequences of source-only and bias-only pulsing modes on discharge characteristics, ion energy distributions (IEDs) to the wafer, and feature profile evolution are discussed. Although the etch depth rates were found to be higher for source-only pulsing compared to the synchronized (source and bias) pulsing mode, the higher ion energies in the afterglow period during source-only pulsing may also increase ion bombardment damage. Compensation of power may allow for increased etch depth rates while retaining the benefits of synchronized pulsing. Further, power compensation level can be varied to achieve fine tuning of the IEDs to the wafer.

  2. Inductive Measurement of Plasma Jet Electrical Conductivity

    NASA Technical Reports Server (NTRS)

    Turner, Matthew W.; Hawk, Clark W.; Litchford, Ron J.

    2005-01-01

    An inductive probing scheme, originally developed for shock tube studies, has been adapted to measure explosive plasma jet conductivities. In this method, the perturbation of an applied magnetic field by a plasma jet induces a voltage in a search coil, which, in turn, can be used to infer electrical conductivity through the inversion of a Fredholm integral equation of the first kind. A 1-inch diameter probe was designed and constructed, and calibration was accomplished by firing an aluminum slug through the probe using a light-gas gun. Exploratory laboratory experiments were carried out using plasma jets expelled from 15-gram high explosive shaped charges. Measured conductivities were in the range of 3 kS/m for unseeded octol charges and 20 kS/m for seeded octol charges containing 2% potassium carbonate by mass.

  3. Inductively heated plasma waste treatment for energy recovery.

    PubMed

    Herdrich, G; Schmalzriedt, S; Laufer, R; Dropmann, M; Gabrielli, R

    2014-08-01

    An assessment of a decentralized inductively heated plasma waste treatment system for energy recovery has been done. The modular miniaturized high enthalpy plasma source IPG6 is a reference for the system and has been qualified for inert but also chemically aggressive gas compositions. An identification and review of applications were undertaken. Niches of high environmental and societal importance are considered: hospital waste (threshold countries), shipboard waste and marine litter. The wastes are reviewed deriving relevant parameter for a system analysis aiming for the derivation of energy production and efficiencies. The system analysis shows advantageous constellation due to the wastes' energy leading to self-feeding systems.

  4. Electrical Coupling Efficiency of Inductive Plasma Accelerators

    NASA Technical Reports Server (NTRS)

    Martin, Adam K.; Eskridge, Richard H.

    2005-01-01

    A single-stage pulsed inductive plasma accelerator is modeled as an inductive mass-driver. The plasma is treated as a rigid slug, which acts as the armature. The system is a transformer, with the drive coil serving as the primary and the slug as the secondary. We derive a set of coupled dynamic-circuit equations, which depend on five dimensionless coefficients, and on the functional form of the mutual inductance profile, M (z). For a given coil geometry, M (z) was determined experimentally and compared to the results of calculations carried out with QuickField. The equations are solved with various coefficient values, in order to determine the conditions that yield high efficiencies. It was found that the coupling efficiency can be quite high and likely scales with power, although this does not preclude operation at lower power with acceptable efficiency. The effect of an imbedded magnetic bias flux, as for the case of a plasmoid thruster, was also included in the calculations.

  5. Note: A pulsed laser ion source for linear induction accelerators

    NASA Astrophysics Data System (ADS)

    Zhang, H.; Zhang, K.; Shen, Y.; Jiang, X.; Dong, P.; Liu, Y.; Wang, Y.; Chen, D.; Pan, H.; Wang, W.; Jiang, W.; Long, J.; Xia, L.; Shi, J.; Zhang, L.; Deng, J.

    2015-01-01

    We have developed a high-current laser ion source for induction accelerators. A copper target was irradiated by a frequency-quadrupled Nd:YAG laser (266 nm) with relatively low intensities of 108 W/cm2. The laser-produced plasma supplied a large number of Cu+ ions (˜1012 ions/pulse) during several microseconds. Emission spectra of the plasma were observed and the calculated electron temperature was about 1 eV. An induction voltage adder extracted high-current ion beams over 0.5 A/cm2 from a plasma-prefilled gap. The normalized beam emittance measured by a pepper-pot method was smaller than 1 π mm mrad.

  6. Note: A pulsed laser ion source for linear induction accelerators

    SciTech Connect

    Zhang, H.; Zhang, K.; Shen, Y.; Jiang, X.; Dong, P.; Liu, Y.; Wang, Y.; Chen, D.; Pan, H.; Wang, W.; Jiang, W.; Long, J.; Xia, L.; Shi, J.; Zhang, L.; Deng, J.

    2015-01-15

    We have developed a high-current laser ion source for induction accelerators. A copper target was irradiated by a frequency-quadrupled Nd:YAG laser (266 nm) with relatively low intensities of 10{sup 8} W/cm{sup 2}. The laser-produced plasma supplied a large number of Cu{sup +} ions (∼10{sup 12} ions/pulse) during several microseconds. Emission spectra of the plasma were observed and the calculated electron temperature was about 1 eV. An induction voltage adder extracted high-current ion beams over 0.5 A/cm{sup 2} from a plasma-prefilled gap. The normalized beam emittance measured by a pepper-pot method was smaller than 1 π mm mrad.

  7. Plasma instabilities in electronegative inductive discharges

    NASA Astrophysics Data System (ADS)

    Marakhtanov, Alexei Mikhail

    Plasma instabilities have been observed in low-pressure inductive discharges, in the transition between low density capacitive mode and high density inductive mode of the discharge when attaching gases such as SF6 and Ar/SF 6 mixtures are used. Oscillations of charged particles, plasma potential and light emitted from the plasma with the frequencies from a few hertz to tens of kilohertz are seen for gas pressures between 1 and 100 mTorr and the discharge power in the range of 75--1200 W. The region of instability increases as the plasma becomes more electronegative and the frequency of plasma oscillations increases as the power, pressure, and gas flow rate increase. The instability frequencies may also depend on the settings of a matching network. A volume-averaged (global) model of the instability has been developed, for a discharge containing time varying densities of electrons, positive ions, and negative ions, and time invariant excited states and neutral densities. The particle and energy balance equations are integrated to produce the dynamical behavior. As pressure or power is varied to cross a threshold, the instability goes through a series of oscillatory states to large scale relaxation oscillations between higher and lower density states. The model qualitatively agrees with experimental observations, and also shows a significant influence of the matching network. A stability analysis of an electronegative discharge has been performed, using a Hurwitz criterion, for a system of linearized particle and power balance differential equations. Capacitive coupling plays a crucial role in the instability process. A variable electrostatic (Faraday) shield has been used to control the capacitive coupling from the excitation coil to the plasma. The plasma instability disappears when the shielded area exceeds 65% of the total area of the coil. The global model of instability gives a slightly higher value of 85% for instability suppression with the same discharge

  8. AETHER: A simulation platform for inductively coupled plasma

    SciTech Connect

    Turkoz, Emre Celik, Murat

    2015-04-01

    An in-house code is developed to simulate the inductively coupled plasma (ICP). The model comprises the fluid, electromagnetic and transformer submodels. Fluid equations are solved to evaluate the plasma flow parameters, including the plasma and neutral densities, ion and neutral velocities, electron flux, electron temperature, and electric potential. The model relies on the ambipolar approximation and offers the evaluation of plasma parameters without solving the sheath region. The electromagnetic model handles the calculation of the electric and magnetic fields using the magnetic vector potential. The transformer model captures the effect of the matching circuit utilized in laboratory experiments for RF power deposition. The continuity and momentum equations are solved using finite volume method. The energy, electric potential, and magnetic vector potential equations are solved using finite difference method. The resulting linear systems of equations are solved with iterative solvers including Jacobi and GMRES. The code is written using the C++ programming language, it works in parallel and has graphical user interface. The model is applied to study ICP characteristics of a plasma confined within a cylindrical chamber with dielectric walls for two different power deposition cases. The results obtained from the developed model are verified using the plasma module of COMSOL Multiphysics. The model is also applied to a plasma source configuration, and it is demonstrated that there is an overall increase in the plasma potential when current is extracted from ICP with a biased wall electrode.

  9. Slotted antenna waveguide plasma source

    NASA Technical Reports Server (NTRS)

    Foster, John (Inventor)

    2007-01-01

    A high density plasma generated by microwave injection using a windowless electrodeless rectangular slotted antenna waveguide plasma source has been demonstrated. Plasma probe measurements indicate that the source could be applicable for low power ion thruster applications, ion implantation, and related applications. This slotted antenna plasma source invention operates on the principle of electron cyclotron resonance (ECR). It employs no window and it is completely electrodeless and therefore its operation lifetime is long, being limited only by either the microwave generator itself or charged particle extraction grids if used. The high density plasma source can also be used to extract an electron beam that can be used as a plasma cathode neutralizer for ion source beam neutralization applications.

  10. Plasma sources for spacecraft neutralization

    NASA Technical Reports Server (NTRS)

    Davis, V. A.; Katz, I.; Mandell, M. J.

    1990-01-01

    The principles of the operation of plasma sources for the neutralization of the surface of a spacecraft traveling in the presence of hot plasma are discussed with special attention given to the hollow-cathode-based plasma contactors. Techiques are developed that allow the calculation of the potentials and particle densities in the near environment of a hollow cathode plasma contactor in both the test tank and the LEO environment. The techniques and codes were validated by comparison of calculated and measured results.

  11. Thrust Stand Measurements of a Conical Pulsed Inductive Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.; Emsellem, Gregory D.

    2012-01-01

    Pulsed inductive plasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductive plasma thrusters can su er from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. The Microwave Assisted Discharge Inductive Plasma Accelerator (MAD-IPA)[4], shown in Fig. 1 is a pulsed inductive plasma thruster that is able to operate at lower pulse energies by partially ionizing propellant with an electron cyclotron resonance (ECR) discharge inside a conical inductive coil whose geometry serves to potentially increase propellant and plasma plume containment relative to at coil geometries. The ECR plasma is created with the use of permanent mag- nets arranged to produce a thin resonance region along the inner surface of the coil, restricting plasma formation and, in turn, current sheet formation to areas of high magnetic coupling to the driving coil.

  12. Intelligent autonomous inductively coupled plasma instrumental operation

    NASA Astrophysics Data System (ADS)

    Webb, Douglas P.

    The development of a framework for the automated analysis of inductively couple plasma atomic emission spectroscopy is present. Some of the research that lead to current state of this framework is presented. A small expert system that uses information about the current sample to generate a line search strategy which minimizes the number of emission lines which need to be measured, and avoids spectral overlaps when possible. A program is presented that evaluates the minimum number of spectral windows required to perform elemental analysis by ICP- AES, given a certain spectral window width. A method with the potential for rapidly ascertaining the physical properties of the sample matrix is presented. This system has the potential to help reduce sample introduction related system failures. Finally, three optimization algorithms are compared in their ability to optimize ICP- AES performance, from this an optimization module was developed for inclusion in the automated analysis framework.

  13. Examination of aluminium and zinc plasmas from an inductive furnace by spectroscopy

    NASA Astrophysics Data System (ADS)

    Burm, K. T. A. L.; Burm

    2013-02-01

    The production of aluminium and zinc plasmas for the deposition of coatings upon steel strip is monitored by optical emission spectroscopy measurements. The plasma is created from an inductive source. The atom and the ion densities as well as the electron temperature are obtained such that the plasma can be characterized. It will be shown that the obtained plasmas are typically highly ionized and deviate from thermal equilibrium.

  14. Laminar-flow torch for helium inductively coupled plasma spectrometry

    SciTech Connect

    Tan, H.; Chan, S.K.; Montaser, A.

    1988-11-15

    Helium inductively coupled plasmas (He ICPs) operated at atmospheric pressure, possess two advantages compared to Ar ICPs for atomic emission spectrometry (AES) and mass spectrometry (MS). First, for the elements tested so far, the detection powers for the He ICPs are superior to those for an Ar discharge. Second, the emission background spectra of the He ICPs are quite simple in the red and the near-infrared regions, thus reducing the spectral interference problems encountered with the determination of halogens and other nonmetals. Relatedly, certain mass spectral interferences noted in the detection of monoisotopic elements are eliminated when helium is used as the plasma gas instead of argon. For the most recent studies of He ICPs, the authors used a tangential-flow torch to form an annular plasma at forward power of 1500 W with a total helium gas flow of 8 L/min. The present study is concerned with the formation and preliminary characterization of a He ICP using a laminar-flow torch. The total helium gas flow for this torch is less than 2 L/min. Studies of plasmas formed in laminar-flow torches are important because of the possibility to reduce one major source of noise resulting from the rotation of the plasma gas in tangential-flow torches.

  15. Constricted glow discharge plasma source

    DOEpatents

    Anders, Andre; Anders, Simone; Dickinson, Michael; Rubin, Michael; Newman, Nathan

    2000-01-01

    A constricted glow discharge chamber and method are disclosed. The polarity and geometry of the constricted glow discharge plasma source is set so that the contamination and energy of the ions discharged from the source are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The source is suitable for applying films of nitrides such as gallium nitride and oxides such as tungsten oxide and for enriching other substances in material surfaces such as oxygen and water vapor, which are difficult process as plasma in any known devices and methods. The source can also be used to assist the deposition of films such as metal films by providing low-energy ions such as argon ions.

  16. Design of a Microwave Assisted Discharge Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.

    2010-01-01

    A new plasma accelerator concept that employs electrodeless plasma preionization and pulsed inductive acceleration is presented. Preionization is achieved through an electron cyclotron resonance discharge that produces a weakly-ionized plasma at the face of a conical theta pinch-shaped inductive coil. The presence of the preionized plasma allows for current sheet formation at lower discharge voltages than those found in other pulsed inductive accelerators. The location of an electron cyclotron resonance discharge can be controlled through the design of the applied magnetic field in the thruster. A finite-element model of the magnetic field was used as a design tool, allowing for the implementation of an arrangement of permanent magnets that yields a small volume of preionized propellant at the coil face. This allows for current sheet formation at the face of the inductive coil, minimizing the initial inductance of the pulse circuit and maximizing the potential efficiency of the new accelerator.

  17. Plasma Sources for Medical Applications - A Comparison of Spot Like Plasmas and Large Area Plasmas

    NASA Astrophysics Data System (ADS)

    Weltmann, Klaus-Dieter

    2015-09-01

    Plasma applications in life science are currently emerging worldwide. Whereas today's commercially available plasma surgical technologies such as argon plasma coagulation (APC) or ablation are mainly based on lethal plasma effects on living systems, the newly emerging therapeutic applications will be based on selective, at least partially non-lethal, possibly stimulating plasma effects on living cells and tissue. Promising results could be obtained by different research groups worldwide revealing a huge potential for the application of low temperature atmospheric pressure plasma in fields such as tissue engineering, healing of chronic wounds, treatment of skin diseases, tumor treatment based on specific induction of apoptotic processes, inhibition of biofilm formation and direct action on biofilms or treatment of dental diseases. The development of suitable and reliable plasma sources for the different therapies requires an in-depth knowledge of their physics, chemistry and parameters. Therefore much basic research still needs to be conducted to minimize risk and to provide a scientific fundament for new plasma-based medical therapies. It is essential to perform a comprehensive assessment of physical and biological experiments to clarify minimum standards for plasma sources for applications in life science and for comparison of different sources. One result is the DIN-SPEC 91315, which is now open for further improvements. This contribution intends to give an overview on the status of commercial cold plasma sources as well as cold plasma sources still under development for medical use. It will discuss needs, prospects and approaches for the characterization of plasmas from different points of view. Regarding the manageability in everyday medical life, atmospheric pressure plasma jets (APPJ) and dielectric barrier discharges (DBD) are of special interest. A comprehensive risk-benefit assessment including the state of the art of commercial sources for medical use

  18. Ion sources for induction linac driven heavy ion fusion

    SciTech Connect

    Rutkowski, H.L.; Eylon, S.; Chupp, W.W.

    1993-08-01

    The use of ion sources in induction linacs for heavy ion fusion is fundamentally different from their use in the rf linac-storage rings approach. Induction linacs require very high current, short pulse extraction usually with large apertures which are dictated by the injector design. One is faced with the problem of extracting beams in a pulsed fashion while maintaining high beam quality during the pulse (low-emittance). Four types of sources have been studied for this application. The vacuum arc and the rf cusp field source are the plasma types and the porous plug and hot alumino-silicate surface source are the thermal types. The hot alumino-silicate potassium source has proved to be the best candidate for the next generation of scaled experiments. The porous plug for potassium is somewhat more difficult to use. The vacuum arc suffers from noise and lifetime problems and the rf cusp field source is difficult to use with very short pulses. Operational experience with all of these types of sources is presented.

  19. Etching of oxynitride thin films using inductively coupled plasma

    SciTech Connect

    Kim, Byungwhan; Lee, Dukwoo; Kim, Nam Jung; Lee, Byung Teak

    2005-05-01

    In this study, silicon oxynitride (SiON) has been etched in a C{sub 2}F{sub 6} inductively coupled plasma. The process parameters examined include a radio frequency source power, bias power, pressure, and C{sub 2}F{sub 6} flow rate. For process optimization, a statistical experimental design was employed to investigate parameter effects under various plasma conditions. The etch rate increased almost linearly with increasing the source or bias power. Main effect analysis revealed that the etch rate is dominated by the source power. The C{sub 2}F{sub 6} flow rate exerted the least impact on both etch rate and profile angle. It was estimated that the C{sub 2}F{sub 6} effect is transparent only as the etchant is supplied sufficiently. Depending on the pressure levels, the etch rate varied in a complicated way. Parameter effects on the profile angle were very small and the profile angle varied between 83 deg. and 87 deg. for all etching experiments. In nearly all experiments, microtrenching was observed. The etch rate and profile angle, optimized at 1000 W source power, 30 W bias power, 6 mTorr pressure, and 60 sccm C{sub 2}F{sub 6} flow rate, are 434 nm/min and 86 deg., respectively.

  20. Thrust Stand Measurements of a Conical Inductive Pulsed Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.

    2013-01-01

    Inductive Pulsed Plasma Thrusters (iPPT) spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current Propellant is accelerated and expelled at a high exhaust velocity (O(10 -- 100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. A conical coil geometry may offer higher propellant utilization efficiency over that of a at inductive coil, however an increase in propellant utilization may be met with a decrease in axial electromagnetic acceleration, and in turn, a decrease in the total axially-directed kinetic energy imparted to the propellant.

  1. Hollow electrode plasma excitation source

    DOEpatents

    Ballou, Nathan E.

    1992-01-01

    A plasma source incorporates a furnace as a hollow anode, while a coaxial cathode is disposed therewithin. The source is located in a housing provided with an ionizable gas such that a glow discharge is produced between anode and cathode. Radiation or ionic emission from the glow discharge characterizes a sample placed within the furnace and heated to elevated temperatures.

  2. Hollow electrode plasma excitation source

    DOEpatents

    Ballou, N.E.

    1992-04-14

    A plasma source incorporates a furnace as a hollow anode, while a coaxial cathode is disposed therewithin. The source is located in a housing provided with an ionizable gas such that a glow discharge is produced between anode and cathode. Radiation or ionic emission from the glow discharge characterizes a sample placed within the furnace and heated to elevated temperatures. 5 figs.

  3. Characteristics of pulsed internal inductively coupled plasma for next generation display processing.

    PubMed

    Kim, Tae Hyung; Lee, Seung Min; Lee, Chul Hee; Bae, Jeong Oun; Yeom, Geun Young; Kim, Kyong Nam

    2014-12-01

    RF pulsed plasma characteristics of inductively coupled plasma (ICP) sources operated with internal linear type antennas for the next generation display processing were investigated. By applying the rf pulse mode in the ICP source, with decreasing the rf pulse duty percentage, the average electron temperature was decreased and the plasma non-uniformity was improved with decreasing the rf pulse duty percentage. In the case of plasma uniformity, for the same time average rf power of 3 kW to the ICP source, the plasma non-uniformity was improved from 8.4% at 100% of rf duty percentage to 6.4% at 60% of rf duty percentage due to the increased diffusion of the plasma during the pulse-off time. When SiO2 was etched using CF4, the etch rate uniformity was also improved due to the improvement of plasma uniformity. PMID:25971107

  4. 21 CFR 640.60 - Source Plasma.

    Code of Federal Regulations, 2010 CFR

    2010-04-01

    ... 21 Food and Drugs 7 2010-04-01 2010-04-01 false Source Plasma. 640.60 Section 640.60 Food and... ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.60 Source Plasma. The proper name of the product shall be Source Plasma. The product is defined as the fluid portion of human...

  5. 21 CFR 640.60 - Source Plasma.

    Code of Federal Regulations, 2011 CFR

    2011-04-01

    ... 21 Food and Drugs 7 2011-04-01 2010-04-01 true Source Plasma. 640.60 Section 640.60 Food and Drugs... STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.60 Source Plasma. The proper name of the product shall be Source Plasma. The product is defined as the fluid portion of human blood collected...

  6. 21 CFR 640.60 - Source Plasma.

    Code of Federal Regulations, 2012 CFR

    2012-04-01

    ... 21 Food and Drugs 7 2012-04-01 2012-04-01 false Source Plasma. 640.60 Section 640.60 Food and... ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.60 Source Plasma. The proper name of the product shall be Source Plasma. The product is defined as the fluid portion of human...

  7. 21 CFR 640.60 - Source Plasma.

    Code of Federal Regulations, 2013 CFR

    2013-04-01

    ... 21 Food and Drugs 7 2013-04-01 2013-04-01 false Source Plasma. 640.60 Section 640.60 Food and... ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.60 Source Plasma. The proper name of the product shall be Source Plasma. The product is defined as the fluid portion of human...

  8. 21 CFR 640.60 - Source Plasma.

    Code of Federal Regulations, 2014 CFR

    2014-04-01

    ... 21 Food and Drugs 7 2014-04-01 2014-04-01 false Source Plasma. 640.60 Section 640.60 Food and... ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.60 Source Plasma. The proper name of the product shall be Source Plasma. The product is defined as the fluid portion of human...

  9. Matrix effects in inductively coupled plasma mass spectrometry

    SciTech Connect

    Chen, Xiaoshan

    1995-07-07

    The inductively coupled plasma is an electrodeless discharge in a gas (usually Ar) at atmospheric pressure. Radio frequency energy generated by a RF power source is inductively coupled to the plasma gas through a water cooled load coil. In ICP-MS the {open_quotes}Fassel{close_quotes} TAX quartz torch commonly used in emission is mounted horizontally. The sample aerosol is introduced into the central flow, where the gas kinetic temperature is about 5000 K. The aerosol is vaporized, atomized, excited and ionized in the plasma, and the ions are subsequently extracted through two metal apertures (sampler and skimmer) into the mass spectrometer. In ICP-MS, the matrix effects, or non-spectroscopic interferences, can be defined as the type of interferences caused by dissolved concomitant salt ions in the solution. Matrix effects can be divided into two categories: (1) signal drift due to the deposition of solids on the sampling apertures; and/or (2) signal suppression or enhancement by the presence of the dissolved salts. The first category is now reasonably understood. The dissolved salts, especially refractory oxides, tend to deposit on the cool tip of the sampling cone. The clogging of the orifices reduces the ion flow into the ICP-MS, lowers the pressure in the first stage of ICP-MS, and enhances the level of metal oxide ions. Because the extent of the clogging increases with the time, the signal drifts down. Even at the very early stage of the development of ICP-MS, matrix effects had been observed. Houk et al. found out that the ICP-MS was not tolerant to solutions containing significant amounts of dissolved solids.

  10. Transient plasma potential in pulsed dual frequency inductively coupled plasmas and effect of substrate biasing

    NASA Astrophysics Data System (ADS)

    Mishra, Anurag; Yeom, Geun Young

    2016-09-01

    An electron emitting probe in saturated floating potential mode has been used to investigate the temporal evolution of plasma potential and the effect of substrate RF biasing on it for pulsed dual frequency (2 MHz/13.56 MHz) inductively coupled plasma (ICP) source. The low frequency power (P2MHz) has been pulsed at 1 KHz and a duty ratio of 50%, while high frequency power (P13.56MHz) has been used in continuous mode. The substrate has been biased with a separate bias power at (P12.56MHz) Argon has been used as a discharge gas. During the ICP power pulsing, three distinct regions in a typical plasma potential profile, have been identified as `initial overshoot', pulse `on-phase' and pulse `off-phase'. It has been found out that the RF biasing of the substrate significantly modulates the temporal evolution of the plasma potential. During the initial overshoot, plasma potential decreases with increasing RF biasing of the substrate, however it increases with increasing substrate biasing for pulse `on-phase' and `off-phase'. An interesting structure in plasma potential profile has also been observed when the substrate bias is applied and its evolution depends upon the magnitude of bias power. The reason of the evolution of this structure may be the ambipolar diffusion of electron and its dependence on bias power.

  11. Ion-wave stabilization of an inductively coupled plasma

    SciTech Connect

    Camparo, J.C.; Mackay, R.

    2006-04-24

    Stabilization of the rf power driving an inductively coupled plasma (ICP) has implications for fields ranging from atomic clocks to analytical chemistry to illumination technology. Here, we demonstrate a technique in which the plasma itself acts as a probe of radio wave power, and provides a correction signal for active rf-power control. Our technique takes advantage of the resonant nature of forced ion waves in the plasma, and their observation in the ICP's optical emission.

  12. Miniaturized cathodic arc plasma source

    DOEpatents

    Anders, Andre; MacGill, Robert A.

    2003-04-15

    A cathodic arc plasma source has an anode formed of a plurality of spaced baffles which extend beyond the active cathode surface of the cathode. With the open baffle structure of the anode, most macroparticles pass through the gaps between the baffles and reflect off the baffles out of the plasma stream that enters a filter. Thus the anode not only has an electrical function but serves as a prefilter. The cathode has a small diameter, e.g. a rod of about 1/4 inch (6.25 mm) diameter. Thus the plasma source output is well localized, even with cathode spot movement which is limited in area, so that it effectively couples into a miniaturized filter. With a small area cathode, the material eroded from the cathode needs to be replaced to maintain plasma production. Therefore, the source includes a cathode advancement or feed mechanism coupled to cathode rod. The cathode also requires a cooling mechanism. The movable cathode rod is housed in a cooled metal shield or tube which serves as both a current conductor, thus reducing ohmic heat produced in the cathode, and as the heat sink for heat generated at or near the cathode. Cooling of the cathode housing tube is done by contact with coolant at a place remote from the active cathode surface. The source is operated in pulsed mode at relatively high currents, about 1 kA. The high arc current can also be used to operate the magnetic filter. A cathodic arc plasma deposition system using this source can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.

  13. Antitumor action of non thermal plasma sources, DBD and Plasma Gun, alone or in combined protocols

    NASA Astrophysics Data System (ADS)

    Robert, Eric; Brullé, Laura; Vandamme, Marc; Riès, Delphine; Le Pape, Alain; Pouvesle, Jean-Michel

    2012-10-01

    The presentation deals with the assessment on two non thermal plasma sources developed and optimized for oncology applications. The first plasma source is a floating-electrode dielectric barrier discharge powered at a few hundreds of Hz which deliver air-plasma directly on the surface of cell culture medium in dishes or on the skin or organs of mice bearing cancer tumors. The second plasma source, so called Plasma Gun, is a plasma jet source triggered in noble gas, transferred in high aspect ratio and flexible capillaries, on targeting cells or tumors after plasma transfer in air through the ``plasma plume'' generated at the capillary outlet. In vitro evidence for massive cancer cell destruction and in vivo tumor activity and growth rate reductions have been measured with both plasma sources. DNA damages, cell cycle arrests and apoptosis induction were also demonstrated following the application of any of the two plasma source both in vitro and in vivo. The comparison of plasma treatment with state of the art chemotherapeutic alternatives has been performed and last but not least the benefit of combined protocols involving plasma and chemotherapeutic treatments has been evidenced for mice bearing orthotopic pancreas cancer and is under evaluation for the colon tumors.

  14. Thrust Stand Measurements of a Conical Inductive Pulsed Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.

    2012-01-01

    Inductive Pulsed Plasma Thrusters (iPPT) are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10 .. 100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. A conical coil geometry may o er higher propellant utilization efficiency over that of a at inductive coil, however an increase in propellant utilization may be met with a decrease in axial electromagnetic acceleration, and in turn, a decrease in the total axially-directed kinetic energy imparted to the propellant.

  15. Flow dynamics and magnetic induction in the von-Kármán plasma experiment

    NASA Astrophysics Data System (ADS)

    Plihon, N.; Bousselin, G.; Palermo, F.; Morales, J.; Bos, W. J. T.; Godeferd, F.; Bourgoin, M.; Pinton, J.-F.; Moulin, M.; Aanesland, A.

    2015-01-01

    The von-Kármán plasma experiment is a novel versatile experimental device designed to explore the dynamics of basic magnetic induction processes and the dynamics of flows driven in weakly magnetized plasmas. A high-density plasma column (1016-1019 particles. m-3) is created by two radio-frequency plasma sources located at each end of a 1 m long linear device. Flows are driven through J × B azimuthal torques created from independently controlled emissive cathodes. The device has been designed such that magnetic induction processes and turbulent plasma dynamics can be studied from a variety of time-averaged axisymmetric flows in a cylinder. MHD simulations implementing volume-penalization support the experimental development to design the most efficient flow-driving schemes and understand the flow dynamics. Preliminary experimental results show that a rotating motion of up to nearly 1 km/s is controlled by the J × B azimuthal torque.

  16. Gold fingerprinting by laser ablation inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Watling, R. John; Herbert, Hugh K.; Delev, Dianne; Abell, Ian D.

    1994-02-01

    Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) has been applied to the characterization of the trace element composition "fingerprint" of selected gold samples from Western Australia and South Africa. By comparison of the elemental associations it is possible to relate gold to a specific mineralizing event, mine or bullion sample. This methodology facilitates identification of the provenance of stolen gold or gold used in salting activities. In this latter case, it is common for gold from a number of sources to be used in the salting process. Consequently, gold in the prospect being salted will not come from a single source and identification of multiple sources for this gold will establish that salting has occurred. Preliminary results also indicate that specific elemental associations could be used to identify the country of origin of gold. The technique has already been applied in 17 cases involving gold theft in Western Australia, where it is estimated that up to 2% of gold production is "relocated" each year as a result of criminal activities.

  17. DETERMINATION OF BROMATE IN DRINKING WATERS BY ION CHROMATOGRAPHY WITH INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRIC DETECTION

    EPA Science Inventory

    Bromate is a disinfection by-product in drinking water, formed during the ozonation of source water containing bromide. An inductively coupled plasma mass spectrometer is combined with an ion chromatograph for the analysis of bromate in drinking waters. Three chromatographic colu...

  18. Atlas of atomic spectral lines of plutonium emitted by an inductively coupled plasma

    SciTech Connect

    Edelson, M.C.; DeKalb, E.L.; Winge, R.K.; Fassel, V.A.

    1986-09-01

    Optical emission spectra from high-purity Pu-242 were generated with a glovebox-enclosed inductively coupled plasma (ICP) source. Spectra covering the 2280 to 7008 Angstrom wavelength range are presented along with general commentary on ICP-Pu spectroscopy.

  19. Behavior of Excited Argon Atoms in Inductively Driven Plasmas

    SciTech Connect

    HEBNER,GREGORY A.; MILLER,PAUL A.

    1999-12-07

    Laser induced fluorescence has been used to measure the spatial distribution of the two lowest energy argon excited states, 1s{sub 5} and 1s{sub 4}, in inductively driven plasmas containing argon, chlorine and boron trichloride. The behavior of the two energy levels with plasma conditions was significantly different, probably because the 1s{sub 5} level is metastable and the 1s{sub 4} level is radiatively coupled to the ground state but is radiation trapped. The argon data is compared with a global model to identify the relative importance of processes such as electron collisional mixing and radiation trapping. The trends in the data suggest that both processes play a major role in determining the excited state density. At lower rfpower and pressure, excited state spatial distributions in pure argon were peaked in the center of the discharge, with an approximately Gaussian profile. However, for the highest rfpowers and pressures investigated, the spatial distributions tended to flatten in the center of the discharge while the density at the edge of the discharge was unaffected. The spatially resolved excited state density measurements were combined with previous line integrated measurements in the same discharge geometry to derive spatially resolved, absolute densities of the 1s{sub 5} and 1s{sub 4} argon excited states and gas temperature spatial distributions. Fluorescence lifetime was a strong fi.mction of the rf power, pressure, argon fraction and spatial location. Increasing the power or pressure resulted in a factor of two decrease in the fluorescence lifetime while adding Cl{sub 2} or BCl{sub 3} increased the fluorescence lifetime. Excited state quenching rates are derived from the data. When Cl{sub 2} or BCl{sub 3} was added to the plasma, the maximum argon metastable density depended on the gas and ratio. When chlorine was added to the argon plasma, the spatial density profiles were independent of chlorine fraction. While it is energetically possible for

  20. Design of a Microwave Assisted Discharge Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.

    2010-01-01

    The design and construction of a thruster that employs electrodeless plasma preionization and pulsed inductive acceleration is described. Preionization is achieved through an electron cyclotron resonance discharge that produces a weakly-ionized plasma at the face of a conical theta pinch-shaped inductive coil. The presence of the preionized plasma allows for current sheet formation at lower discharge voltages than those employed in other pulsed inductive accelerators that do not employ preionization. The location of the electron cyclotron resonance discharge is controlled through the design of the applied magnetic field in the thruster. Finite element analysis shows that there is an arrangement of permanent magnets that yields a small volume of resonant magnetic field at the coil face. Preionization in the resonant zone leads to current sheet formation at the coil face, which minimizes the initial inductance of the pulse circuit and maximizes the potential electrical efficiency of the accelerator. A magnet assembly was constructed around an inductive coil to provide structural support to the selected arrangement of neodymium magnets. Measured values of the resulting magnetic field compare favorably with the finite element model.

  1. Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing

    SciTech Connect

    Kim, K.N.; Jung, S.J.; Lee, Y.J.; Yeom, G.Y.; Lee, S.H.; Lee, J.K.

    2005-03-15

    An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasma source having the size of 1020 mmx830 mm, and high density plasmas on the order of 2.3x10{sup 11} cm{sup -3} were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mmx660 mm at 5000 W without having a standing-wave effect.

  2. Method of processing materials using an inductively coupled plasma

    DOEpatents

    Hull, D.E.; Bieniewski, T.M.

    1987-04-13

    A method of processing materials. The invention enables ultrafine, ultrapure powders to be formed from solid ingots in a gas free environment. A plasma is formed directly from an ingot which insures purity. The vaporized material is expanded through a nozzle and the resultant powder settles on a cold surface. An inductively coupled plasma may also be used to process waste chemicals. Noxious chemicals are directed through a series of plasma tubes, breaking molecular bonds and resulting in relatively harmless atomic constituents. 3 figs.

  3. Inductively coupled plasma torch with laminar flow cooling

    DOEpatents

    Rayson, Gary D.; Shen, Yang

    1991-04-30

    An improved inductively coupled gas plasma torch. The torch includes inner and outer quartz sleeves and tubular insert snugly fitted between the sleeves. The insert includes outwardly opening longitudinal channels. Gas flowing through the channels of the insert emerges in a laminar flow along the inside surface of the outer sleeve, in the zone of plasma heating. The laminar flow cools the outer sleeve and enables the torch to operate at lower electrical power and gas consumption levels additionally, the laminar flow reduces noise levels in spectroscopic measurements of the gaseous plasma.

  4. Characterization of an RF plasma ion source for ion implantation

    SciTech Connect

    Kopalidis, Peter M.; Wan Zhimin

    2012-11-06

    A novel inductively coupled RF plasma ion source has been developed for use in a beamline ion implanter. Ion density data have been taken with an array of four Langmuir probes spaced equally at the source extraction arc slit. These provide ion density uniformity information as a function of source pressure, RF power and gas mixture composition. In addition, total extracted ion beam current data are presented for the same conditions. The comparative advantages of the RF source in terms of higher beam current, reduced maintenance and overall productivity improvement compared to a hot cathode source are discussed.

  5. Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo

    SciTech Connect

    Shimada, Masashi; Tynan, George R.; Cattolica, Robert

    2008-02-01

    Neutral and ion transport phenomena were simulated by a hybrid-type direct simulation Monte Carlo (DSMC) method for a one-dimensional (1D) electrostatic plasma in Ar/N{sub 2} mixtures to identify the mechanism of neutral depletion. The results show that gas heating and pressure balance are the main mechanisms of neutral depletion in an inductively coupled plasma. When plasma pressure becomes comparable to neutral pressure in high density plasma sources (T{sub e}{approx}2-5 eV, n{sub e}{approx}10{sup 11}-10{sup 12} cm{sup -3}), the total pressure (neutral pressure and plasma pressure) is conserved. Therefore, the finite plasma pressure (mainly electron pressure) reduces the neutral pressure. Neutrals collide with ions that have been accelerated by the ambipolar electric field and with Franck-Condon dissociated atoms, resulting in gas heating. Significant neutral depletion (up to 90%) is found at the typical condition of inductively coupled plasma process reactors. The resulting neutral depletion enhances the plasma transport to the surrounding wall, increases the particle loss, and decreases the plasma density.

  6. Impact of Gas Heating in Inductively Coupled Plasmas

    NASA Technical Reports Server (NTRS)

    Hash, D. B.; Bose, D.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Sharma, S. P.; Biegel, Bryan (Technical Monitor)

    2001-01-01

    Recently it has been recognized that the neutral gas in inductively coupled plasma reactors heats up significantly during processing. The resulting gas density variations across the reactor affect reaction rates, radical densities, plasma characteristics, and uniformity within the reactor. A self-consistent model that couples the plasma generation and transport to the gas flow and heating has been developed and used to study CF4 discharges. A Langmuir probe has been used to measure radial profiles of electron density and temperature. The model predictions agree well with the experimental results. As a result of these comparisons along with the poorer performance of the model without the gas-plasma coupling, the importance of gas heating in plasma processing has been verified.

  7. Inductive and Electrostatic Acceleration in Relativistic Jet-Plasma Interactions

    SciTech Connect

    Ng, Johnny S.T.; Noble, Robert J.; /SLAC

    2005-07-13

    We report on the observation of rapid particle acceleration in numerical simulations of relativistic jet-plasma interactions and discuss the underlying mechanisms. The dynamics of a charge-neutral, narrow, electron-positron jet propagating through an unmagnetized electron-ion plasma was investigated using a three-dimensional, electromagnetic, particle-in-cell computer code. The interaction excited magnetic filamentation as well as electrostatic (longitudinal) plasma instabilities. In some cases, the longitudinal electric fields generated inductively and electrostatically reached the cold plasma wave-breaking limit, and the longitudinal momentum of about half the positrons increased by 50% with a maximum gain exceeding a factor of two. The results are relevant to understanding the micro-physics at the interface region of an astrophysical jet with the interstellar plasma, for example, the edge of a wide jet or the jet-termination point.

  8. Characteristics of pulsed dual frequency inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Seo, Jin Seok; Kim, Kyoung Nam; Kim, Ki Seok; Kim, Tae Hyung; Yeom, Geun Young

    2015-01-01

    To control the plasma characteristics more efficiently, a dual antenna inductively coupled plasma (DF-ICP) source composed of a 12-turn inner antenna operated at 2 MHz and a 3-turn outer antenna at 13.56 MHz was pulsed. The effects of pulsing to each antenna on the change of plasma characteristics and SiO2 etch characteristics using Ar/C4F8 gas mixtures were investigated. When the duty percentage was decreased from continuous wave (CW) mode to 30% for the inner or outer ICP antenna, decrease of the average electron temperature was observed for the pulsing of each antenna. Increase of the CF2/F ratio was also observed with decreasing duty percentage of each antenna, indicating decreased dissociation of the C4F8 gas due to the decreased average electron temperature. When SiO2 etching was investigated as a function of pulse duty percentage, increase of the etch selectivity of SiO2 over amorphous carbon layer (ACL) was observed while decreasing the SiO2 etch rate. The increase of etch selectivity was related to the change of gas dissociation characteristics, as observed by the decrease of average electron temperature and consequent increase of the CF2/F ratio. The decrease of the SiO2 etch rate could be compensated for by using the rf power compensated mode, that is, by maintaining the same time-average rf power during pulsing, instead of using the conventional pulsing mode. Through use of the power compensated mode, increased etch selectivity of SiO2/ACL similar to the conventional pulsing mode could be observed without significant decrease of the SiO2 etch rate. Finally, by using the rf power compensated mode while pulsing rf powers to both antennas, the plasma uniformity over the 300 mm diameter substrate could be improved from 7% for the CW conditions to about around 3.3% with the duty percentage of 30%.

  9. Inductively Coupled Plasma Zoom-Time-of-Flight Mass Spectrometry

    NASA Astrophysics Data System (ADS)

    Dennis, Elise A.; Ray, Steven J.; Enke, Christie G.; Hieftje, Gary M.

    2016-03-01

    A zoom-time-of-flight mass spectrometer has been coupled to an inductively coupled plasma (ICP) ionization source. Zoom-time-of-flight mass spectrometry (zoom-TOFMS) combines two complementary types of velocity-based mass separation. Specifically, zoom-TOFMS alternates between conventional, constant-energy acceleration (CEA) TOFMS and energy-focused, constant-momentum acceleration (CMA) (zoom) TOFMS. The CMA mode provides a mass-resolution enhancement of 1.5-1.7× over CEA-TOFMS in the current, 35-cm ICP-zoom-TOFMS instrument geometry. The maximum resolving power (full-width at half-maximum) for the ICP-zoom-TOFMS instrument is 1200 for CEA-TOFMS and 1900 for CMA-TOFMS. The CMA mode yields detection limits of between 0.02 and 0.8 ppt, depending upon the repetition rate and integration time—compared with single ppt detection limits for CEA-TOFMS. Isotope-ratio precision is shot-noise limited at approximately 0.2% relative-standard deviation (RSD) for both CEA- and CMA-TOFMS at a 10 kHz repetition rate and an integration time of 3-5 min. When the repetition rate is increased to 43.5 kHz for CMA, the shot-noise limited, zoom-mode isotope-ratio precision is improved to 0.09% RSD for the same integration time.

  10. 3D-PIC simulation of an inductively coupled ion source

    NASA Astrophysics Data System (ADS)

    Henrich, Robert; Muehlich, Nina Sarah; Becker, Michael; Heiliger, Christian

    2015-09-01

    Inductively coupled ion sources are applied to a wide range of plasma applications, especially surface modifications. The knowledge of the behavior and precise information of the plasma parameters are of main importance. These values are tedious to measure without influencing the discharge. By applying our fully three-dimensional PlasmaPIC tool we are able to reach these plasma parameters with a spatial and temporal resolution which is quite hard to achieve experimentally. PlasmaPIC is used for modeling discharges in arbitrary geometries without limitations to any symmetry. By this means we are able to demonstrate that the plasma density has an irrotational character. Furthermore, we will show the dependence of the plasma parameters of different working conditions. We will show that for gridded inductively coupled ion sources the neutral gas pressure inside the discharge chamber depends on the extraction of ions. This effect is considered in PlasmaPIC by a self-consistent coupling of the neutral gas simulation and the plasma simulation whereas the neutral gas distribution is calculated using the direct simulation Monte Carlo method (DSMC). This work has been supported by the ``Bundesministerium fuer Wirtschaft und Energie.'' Grant 50RS1507.

  11. Plasma Interaction and Induction Signatures at Callisto: Preparations for JUICE

    NASA Astrophysics Data System (ADS)

    Liuzzo, Lucas; Feyerabend, Moritz; Simon, Sven; Motschmann, Uwe

    2016-04-01

    The interaction of the Jovian magnetospheric environment with an atmosphere and induced dipole at Callisto is investigated by applying a hybrid (kinetic ions, fluid electrons) simulation code. Callisto is unique among the Galilean satellites in its interaction with the ambient magnetospheric plasma as the gyroradii of the impinging plasma and pickup ions are large compared to the size of the moon. A kinetic representation of the ions is therefore mandatory to adequately describe the resulting asymmetries in the electromagnetic fields and the deflection of the plasma flow near Callisto. When Callisto is embedded in the magnetodisk lobes of Jupiter, a dipolar magnetic field is generated via induction in a subsurface ocean. This field creates an obstacle to the impinging magnetospheric plasma flow at the moon. However, when Callisto is located near the center of the Jovian current sheet, local magnetic perturbations due to the magnetosphere-ionosphere interaction are more than twice the strength of the background field and may therefore obscure any magnetic signal generated via induction in a subsurface ocean. Our simulations demonstrate that the deflection of the magnetospheric plasma into Callisto's wake cannot alone explain the plasma density enhancement of two orders of magnitude measured in the wake of the interaction region during Galileo flybys of the moon. However, through inclusion of an ionosphere around Callisto, modeled densities in the wake are consistent with in situ measurements.

  12. Electron energy distributions in a magnetized inductively coupled plasma

    SciTech Connect

    Song, Sang-Heon E-mail: Sang-Heon.Song@us.tel.com; Yang, Yang; Kushner, Mark J.

    2014-09-15

    Optimizing and controlling electron energy distributions (EEDs) is a continuing goal in plasma materials processing as EEDs determine the rate coefficients for electron impact processes. There are many strategies to customize EEDs in low pressure inductively coupled plasmas (ICPs), for example, pulsing and choice of frequency, to produce the desired plasma properties. Recent experiments have shown that EEDs in low pressure ICPs can be manipulated through the use of static magnetic fields of sufficient magnitudes to magnetize the electrons and confine them to the electromagnetic skin depth. The EED is then a function of the local magnetic field as opposed to having non-local properties in the absence of the magnetic field. In this paper, EEDs in a magnetized inductively coupled plasma (mICP) sustained in Ar are discussed with results from a two-dimensional plasma hydrodynamics model. Results are compared with experimental measurements. We found that the character of the EED transitions from non-local to local with application of the static magnetic field. The reduction in cross-field mobility increases local electron heating in the skin depth and decreases the transport of these hot electrons to larger radii. The tail of the EED is therefore enhanced in the skin depth and depressed at large radii. Plasmas densities are non-monotonic with increasing pressure with the external magnetic field due to transitions between local and non-local kinetics.

  13. Some plasma aspects and plasma diagnostics of ion sources (invited)

    SciTech Connect

    Wiesemann, Klaus

    2008-02-15

    We consider plasma properties in the most advanced type of plasma ion sources, electron cyclotron resonance ion sources for highly charged ions. Depending on the operation conditions the plasma in these sources may be highly ionized, which completely changes its transport properties. The most striking difference to weakly ionized plasma is that diffusion will become intrinsically ambipolar. We further discuss means of plasma diagnostics. As noninvasive diagnostic methods we will discuss analysis of the ion beam, optical spectroscopy, and measurement of the x-ray bremsstrahlung continuum. From beam analysis and optical spectroscopy one may deduce ion densities, and electron densities and distribution functions as a mean over the line of sight along the axis (optical spectroscopy) or at the plasma edge (ion beam). From x-ray spectra one obtains information about the population of highly energetic electrons and the energy transfer from the driving electromagnetic waves to the plasma--basic data for plasma modeling.

  14. Some plasma aspects and plasma diagnostics of ion sources.

    PubMed

    Wiesemann, Klaus

    2008-02-01

    We consider plasma properties in the most advanced type of plasma ion sources, electron cyclotron resonance ion sources for highly charged ions. Depending on the operation conditions the plasma in these sources may be highly ionized, which completely changes its transport properties. The most striking difference to weakly ionized plasma is that diffusion will become intrinsically ambipolar. We further discuss means of plasma diagnostics. As noninvasive diagnostic methods we will discuss analysis of the ion beam, optical spectroscopy, and measurement of the x-ray bremsstrahlung continuum. From beam analysis and optical spectroscopy one may deduce ion densities, and electron densities and distribution functions as a mean over the line of sight along the axis (optical spectroscopy) or at the plasma edge (ion beam). From x-ray spectra one obtains information about the population of highly energetic electrons and the energy transfer from the driving electromagnetic waves to the plasma -- basic data for plasma modeling.

  15. Inductive and electrostatic acceleration in relativistic jet-plasma interactions.

    PubMed

    Ng, Johnny S T; Noble, Robert J

    2006-03-24

    We report on the observation of rapid particle acceleration in numerical simulations of relativistic jet-plasma interactions and discuss the underlying mechanisms. The dynamics of a charge-neutral, narrow, electron-positron jet propagating through an unmagnetized electron-ion plasma was investigated using a three-dimensional, electromagnetic, particle-in-cell computer code. The interaction excited magnetic filamentation as well as electrostatic plasma instabilities. In some cases, the longitudinal electric fields generated inductively and electrostatically reached the cold plasma-wave-breaking limit, and the longitudinal momentum of about half the positrons increased by 50% with a maximum gain exceeding a factor of 2 during the simulation period. Particle acceleration via these mechanisms occurred when the criteria for Weibel instability were satisfied.

  16. Improvement of uniformity in a weakly magnetized inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Lee, W. H.; Cheong, H. W.; Kim, J. W.; Whang, K. W.

    2015-12-01

    Magnetic fields are applied to inductively coupled plasma (ICP) to achieve high plasma densities using electromagnets. If the magnetic fields are set up such that the magnitude of magnetic flux density on the substrate decreases with both radial and axial distances from the substrate’s center (here after referred to as M-ICP-A), the plasma density increases by 237% compared with that for ICP although the non-uniformity of the plasma density for M-ICP-A (11.1%) is higher than that for ICP (10.9%). As the rate of decrease in the magnitude of magnetic flux density on the substrate increases both radially and axially, the non-uniformity in the plasma density increases further. The increase in the non-uniformity for M-ICP-A was confirmed to arise from the flute instability. To suppress the flute instability, we arranged the magnitude of magnetic flux density on the substrate to increase with increasing distance from the substrate center both radially and axially (here after referred to as M-ICP-V). In this configuration, plasma fluctuations were not observed, hence the plasma density non-uniformity was lowered to 8.1%, although the measured plasma density was higher than that for M-ICP-A. The oxide etch-rate non-uniformity in M-ICP-V (2.5%) was also lower than that for ICP (5.2%) or that for M-ICP-A (21.4%).

  17. Radio frequency induction plasma generator 80-kV test stand operation

    SciTech Connect

    Goede, H.; DiVergilio, W.F.; Fosnight, V.V.; Vella, M.C.; Ehlers, K.W.; Kippenhan, D.; Pincosy, P.A.; Pyle, R.V.

    1986-07-01

    Beam extraction tests at energies up to 80 kV were performed using a radio frequency induction (RFI) plasma generator hydrogen ion source. A 7 x 10-cm/sup 2/, long pulse accelerator was operated with a 10 x 10-cm/sup 2/ axial magnetic cusp bucket and a magnetic-filter bucket. Atomic fractions (up to 85% H/sup +/), plasma production efficiencies (roughly-equal0.6 A of beam per kW rf power), and beam divergence were at least as good as with arc plasmas in similar chambers. Potential advantages of the RFI plasma sources for large-scale applications are ease of operation, reliability, and extended service life.

  18. Thin film coating process using an inductively coupled plasma

    DOEpatents

    Kniseley, Richard N.; Schmidt, Frederick A.; Merkle, Brian D.

    1990-01-30

    Thin coatings of normally solid materials are applied to target substrates using an inductively coupled plasma. Particles of the coating material are vaporized by plasma heating, and pass through an orifice to a first vacuum zone in which the particles are accelerated to a velocity greater than Mach 1. The shock wave generated in the first vacuum zone is intercepted by the tip of a skimmer cone that provides a second orifice. The particles pass through the second orifice into a second zone maintained at a higher vacuum and impinge on the target to form the coating. Ultrapure coatings can be formed.

  19. [Inductively coupled plasma and clinical biology. Toxicological applications].

    PubMed

    Goullé, J-P; Mahieu, L; Lainé, G; Lacroix, C; Clarot, F; Vaz, E; Proust, B

    2004-09-01

    The multi-elementary quantitation method using inductively coupled plasma mass spectrometry has been widely developed for use with biological fluids. Many elements can be quantified simultaneously in biological fluids, including: Li, Be, B, Al, Mn, Co, Ni, Cu, Zn, Ga, Ge, As, Se, Rb, Sr, Mo, Pd, Cd, Sn, Sb, Te, Ba, W, Pt, Hg, Tl, Pb, Bi, U. The validation procedure is described by the French Society of Clinical Biology. Results for urine are corrected after creatinine determination. We report applications in clinical toxicology and forensic toxicology. Advances in inductively coupled plasma mass spectrometry in the field of clinical biology are particularly important for toxicological analysis. This powerful tool is helpful for better patient care and for the search for cause of death.

  20. Relatively high plasma density in low pressure inductive discharges

    SciTech Connect

    Kang, Hyun-Ju; Kim, Yu-Sin; Chung, Chin-Wook

    2015-09-15

    Electron energy probability functions (EEPFs) were measured in a low pressure argon inductive discharge. As radio frequency (RF) power increases, discharge mode is changed from E-mode (capacitively coupled) to H-mode (inductively coupled) and the EEPFs evolve from a bi-Maxwellian distribution to a Maxwellian distribution. It is found that the plasma densities at low RF powers (<30 W) are much higher than the density predicted from the slope of the densities at high powers. Because high portion of high energy electrons of the bi-Maxwellian distribution lowers the collisional energy loss and low electron temperature of low energy electrons reduces particle loss rate at low powers. Therefore, the energy loss of plasma decreases and electron densities become higher at low powers.

  1. Oxide Coated Cathode Plasma Source of Linear Magnetized Plasma Device

    NASA Astrophysics Data System (ADS)

    Hu, Guanghai; Jin, Xiaoli; Yuan, Lin; Zhang, Qiaofeng; Xie, Jinlin; Li, Hong; Liu, Wandong

    2016-09-01

    Plasma source is the most important part of the laboratory plasma platform for fundamental plasma experimental research. Barium oxide coated cathode plasma source is well recognized as an effective technique due to its high electron emission current. An indirectly heated oxide coated cathode plasma source has been constructed on a linear magnetized plasma device. The electron emission current density can reach 2 A/cm2 to 6 A/cm2 in pulsed mode within pulse length 5-20 ms. A 10 cm diameter, 2 m long plasma column with density 1018 m-3 to 1019 m3 and electron temperature Te ≃ 3-7 eV is produced. The spatial uniformity of the emission ability is less than 4% and the discharge reproducibility is better than 97%. With a wide range of the plasma parameters, this kind of plasma source provides great flexibility for many basic plasma investigations. The detail of construction and initial characterization of oxide coated cathode are described in this paper. supported by National Natural Science Foundation of China (No. 11275200)

  2. Oxide Coated Cathode Plasma Source of Linear Magnetized Plasma Device

    NASA Astrophysics Data System (ADS)

    Hu, Guanghai; Jin, Xiaoli; Yuan, Lin; Zhang, Qiaofeng; Xie, Jinlin; Li, Hong; Liu, Wandong

    2016-09-01

    Plasma source is the most important part of the laboratory plasma platform for fundamental plasma experimental research. Barium oxide coated cathode plasma source is well recognized as an effective technique due to its high electron emission current. An indirectly heated oxide coated cathode plasma source has been constructed on a linear magnetized plasma device. The electron emission current density can reach 2 A/cm2 to 6 A/cm2 in pulsed mode within pulse length 5–20 ms. A 10 cm diameter, 2 m long plasma column with density 1018 m‑3 to 1019 m3 and electron temperature Te ≃ 3–7 eV is produced. The spatial uniformity of the emission ability is less than 4% and the discharge reproducibility is better than 97%. With a wide range of the plasma parameters, this kind of plasma source provides great flexibility for many basic plasma investigations. The detail of construction and initial characterization of oxide coated cathode are described in this paper. supported by National Natural Science Foundation of China (No. 11275200)

  3. High Power Helicon Plasma Source for Plasma Processing

    NASA Astrophysics Data System (ADS)

    Prager, James; Ziemba, Timothy; Miller, Kenneth E.

    2015-09-01

    Eagle Harbor Technologies (EHT), Inc. is developing a high power helicon plasma source. The high power nature and pulsed neutral gas make this source unique compared to traditional helicon source. These properties produce a plasma flow along the magnetic field lines, and therefore allow the source to be decoupled from the reaction chamber. Neutral gas can be injected downstream, which allows for precision control of the ion-neutral ratio at the surface of the sample. Although operated at high power, the source has demonstrated very low impurity production. This source has applications to nanoparticle productions, surface modification, and ionized physical vapor deposition.

  4. Two-dimensional simulation of inductive-capacitive transition instability in an electronegative plasma

    NASA Astrophysics Data System (ADS)

    Kawamura, E.; Lieberman, M. A.; Lichtenberg, A. J.; Graves, D. B.

    2012-08-01

    Plasma instabilities are observed in low-pressure inductive discharges in the transition between low density capacitively driven and high density inductively driven discharges when attaching gases are used. A two-dimensional hybrid fluid-analytic simulation is used to determine the space- and time-varying densities of electrons, positive and negative ions, and neutral species, and electron and neutral gas temperatures. The simulation includes both the capacitive and inductive coupling of the source coils to the plasma and the neutral gas dissociation and heating. The plasma is described using the time-dependent fluid equations, along with an analytical sheath model. The simulation is applied to an experiment in Cl2, in which gaps in the electron and positive ion densities versus power curves were observed, with our numerical results indicating the existence of an inductive-capacitive transition instability, corresponding approximately to the observed gaps. The fluid calculation captures various features that are not included in previous global instability models. A method is developed to match the numerical results to the global model formalism, which predicts the existence of the unstable mode, as numerically found. The time and space variations can be used to improve the global model formalism.

  5. Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma

    SciTech Connect

    Cheong, Hee-Woon; Lee, Woohyun; Kim, Ji-Won; Whang, Ki-Woong; Kim, Hyuk; Park, Wanjae

    2015-07-15

    Spatial distributions of various plasma parameters such as plasma density, electron temperature, and radical density in an inductively coupled plasma (ICP) and a magnetized inductively coupled plasma (M-ICP) were investigated and compared. Electron temperature in between the rf window and the substrate holder of M-ICP was higher than that of ICP, whereas the one just above the substrate holder of M-ICP was similar to that of ICP when a weak (<8 G) magnetic field was employed. As a result, radical densities in M-ICP were higher than those in ICP and the etch rate of oxide in M-ICP was faster than that in ICP without severe electron charging in 90 nm high aspect ratio contact hole etch.

  6. Cathode configuration influence on low-inductance vacuum spark plasma dynamics

    NASA Astrophysics Data System (ADS)

    Sarantsev, S. A.; Dvoeglazov, Ya M.; Dodulad, E. I.; Raevsky, I. F.; Savjolov, A. S.

    2016-09-01

    The results of studies of cathode configuration influence on high current low- inductance vacuum spark (HLVS) plasma dynamics are presented in this work. The research was carried out on “PION” installation using shadowgraphy method. Molecular nitrogen laser (λ = 337 nm) was used as a radiation source. It was determined that the HLVS behavior changes with the increase of number of discharges. In a fresh electrode system (less than 200 discharges) the dependence of constriction position on the discharge trigger position is observed during HLVS development. Also, high gradients of plasma density and secondary constrictions are observed. In a previously exploited electrode system (more than 300 discharges) HLVS behavior changes: plasma density gradients become less expressed, secondary constrictions disappear. In electrode systems with highly developed cathode surface plasma density gradient distribution pattern only slightly changes from discharge to discharge, e.g. the discharge becomes more stable.

  7. Langmuir Probe Measurements in an Inductively Coupled GEC Reference Cell Plasma

    NASA Technical Reports Server (NTRS)

    Ji, J. S.; Kim, J. S.; Cappelli, M. A.; Sharma, S. P.; Arnold, J. O. (Technical Monitor)

    1998-01-01

    Measurements of electron number density, electron temperature, and electron energy distribution function (EEDF) using a compensated Langmuir probe have been performed on an inductively (transformer ) coupled Gaseous Electronics Conference (GEC) reference cell plasma. The plasma source is operated with CH4, CF4, or their mixtures with argon. The effect of independently driving the electrode supporting the wafer on the probe data is studied. In particular, we find that the plasma structure depends on the phase in addition to the magnitude of the power coupled to the electrode relative to that of the transformer coil. The Langmuir probe is translated in a plane parallel to the electrode to investigate the spatial structure of the plasma. The probe data is also compared with fluid model predictions.

  8. ION SOURCE (R.F. INDUCTION TYPE)

    DOEpatents

    Mills, C.B.

    1963-04-01

    A method is given for producing energetic ions by ionizing a gas with an oscillating electric field which is parallel to a confining magnetic field, then reorienting the fields perpendicular to each other to accelerate the ions to higher energies. An ion source is described wherein a secondary coil threads the bottom of a rectangular ionization chamber and induces an oscillating field parallel to a fixed intense magnetic field through the chamber. (AEC)

  9. Low-pressure water-cooled inductively coupled plasma torch

    DOEpatents

    Seliskar, C.J.; Warner, D.K.

    1984-02-16

    An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an rf induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the rf heating coil is disposed around the outer tube above and adjacent to the water inlet.

  10. Low-pressure water-cooled inductively coupled plasma torch

    DOEpatents

    Seliskar, Carl J.; Warner, David K.

    1988-12-27

    An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an r.f. induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the r.f. heating coil is disposed around the outer tube above and adjacent to the water inlet.

  11. Numerical Simulations of Low Pressure Inductively Coupled Plasmas in Geometrically Complex Reactors

    NASA Astrophysics Data System (ADS)

    Yu, Ben; Wu, Hanming; Krishnan, Anantha

    1996-10-01

    A two-dimensional fluid model has been developed for simulation of low pressure inductively coupled plasma (ICP) reactors. The model obtains solutions for the plasma density, electron temperature, and electric field for the given operating conditions. The physical phenomena and processes such as ambipolar diffusion, thermal diffusion, quasi-neutrality, ionization, inductive Joule heating, and excitations are considered in the model. A significant feature of the model is its capability of handling complex geometries that are often encountered in industrial reactors. Complex reactor geometries are modeled by a body-fitted-coordinate (BFC) formulation. A series of numerical experiments have been conducted using the model to study effects of various parameters such as chamber pressure, size of the wafer, position of the inductive coil, and the power input into the plasma. Different reactor geometries such as the GEC ICP reference cell and the belljar reactor have been simulated. The results of the parametric experiments are presented to show certain systematic trends in performance parameters such as uniformity and processing rates. The ICP model has been coupled to a computational fluid dynamics (CFD) code (capable of 3D simulations) that obtains the flow and pressure distribution inside the chamber. The ICP model will use pressure predictions (from the CFD model) to compute the local ionization rates. Chemical source/sink terms from the plasma dissociation model will be used by the CFD code to account for local reactant depletion effects.

  12. On-line elemental analysis of fossil fuel process streams by inductively coupled plasma spectrometry

    SciTech Connect

    Chisholm, W.P.

    1995-06-01

    METC is continuing development of a real-time, multi-element plasma based spectrometer system for application to high temperature and high pressure fossil fuel process streams. Two versions are under consideration for development. One is an Inductively Coupled Plasma system that has been described previously, and the other is a high power microwave system. The ICP torch operates on a mixture of argon and helium with a conventional annular swirl flow plasma gas, no auxiliary gas, and a conventional sample stream injection through the base of the plasma plume. A new, demountable torch design comprising three ceramic sections allows bolts passing the length of the torch to compress a double O-ring seal. This improves the reliability of the torch. The microwave system will use the same data acquisition and reduction components as the ICP system; only the plasma source itself is different. It will operate with a 750-Watt, 2.45 gigahertz microwave generator. The plasma discharge will be contained within a narrow quartz tube one quarter wavelength from a shorted waveguide termination. The plasma source will be observed via fiber optics and a battery of computer controlled monochromators. To extract more information from the raw spectral data, a neural net computer program is being developed. This program will calculate analyte concentrations from data that includes analyte and interferant spectral emission intensity. Matrix effects and spectral overlaps can be treated more effectively by this method than by conventional spectral analysis.

  13. Fission Yield Measurements by Inductively Coupled Plasma Mass-Spectrometry

    SciTech Connect

    Irina Glagolenko; Bruce Hilton; Jeffrey Giglio; Daniel Cummings; Karl Grimm; Richard McKnight

    2009-11-01

    Correct prediction of the fission products inventory in irradiated nuclear fuels is essential for accurate estimation of fuel burnup, establishing proper requirements for spent fuel transportation and storage, materials accountability and nuclear forensics. Such prediction is impossible without accurate knowledge of neutron induced fission yields. Unfortunately, the accuracy of the fission yields reported in the ENDF/B-VII.0 library is not uniform across all of the data and much of the improvement is desired for certain isotopes and fission products. We discuss our measurements of cumulative fission yields in nuclear fuels irradiated in thermal and fast reactor spectra using Inductively Coupled Plasma Mass Spectrometry.

  14. Induction plasma calcining of pigment particles for thermal control coatings

    NASA Technical Reports Server (NTRS)

    Farley, E. P.

    1971-01-01

    Induction plasma heating techniques were studied for calcining zinc orthotitanate particles for use in thermal control coatings. Previous studies indicated that the optimum calcining temperature is between 1400 and 1750 C. An intermediate temperature (1670 C) was chosen as a reference point for running a temperature series at the reference point and 220 C on both sides. The effect of varying chamber temperature on the reflectance spectra, before and after vacuum UV irradiation, is presented. The correlation between Zn2Ti04 paramagnetic resonance activity and its susceptibility to vacuum UV damage is discussed.

  15. Surface plasma source with saddle antenna radio frequency plasma generator.

    PubMed

    Dudnikov, V; Johnson, R P; Murray, S; Pennisi, T; Piller, C; Santana, M; Stockli, M; Welton, R

    2012-02-01

    A prototype RF H(-) surface plasma source (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasma source test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA∕kW. Control experiments with H(-) beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing.

  16. Surface plasma source with saddle antenna radio frequency plasma generator

    SciTech Connect

    Dudnikov, V.; Johnson, R. P.; Murray, S.; Pennisi, T.; Piller, C.; Santana, M.; Stockli, M.; Welton, R.

    2012-02-15

    A prototype RF H{sup -} surface plasma source (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasma source test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA/kW. Control experiments with H{sup -} beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing.

  17. Saturn Plasma Sources and Associated Transport Processes

    NASA Astrophysics Data System (ADS)

    Blanc, M.; Andrews, D. J.; Coates, A. J.; Hamilton, D. C.; Jackman, C. M.; Jia, X.; Kotova, A.; Morooka, M.; Smith, H. T.; Westlake, J. H.

    2015-10-01

    This article reviews the different sources of plasma for Saturn's magnetosphere, as they are known essentially from the scientific results of the Cassini-Huygens mission to Saturn and Titan. At low and medium energies, the main plasma source is the H2O cloud produced by the "geyser" activity of the small satellite Enceladus. Impact ionization of this cloud occurs to produce on the order of 100 kg/s of fresh plasma, a source which dominates all the other ones: Titan (which produces much less plasma than anticipated before the Cassini mission), the rings, the solar wind (a poorly known source due to the lack of quantitative knowledge of the degree of coupling between the solar wind and Saturn's magnetosphere), and the ionosphere. At higher energies, energetic particles are produced by energy diffusion and acceleration of lower energy plasma produced by the interchange instabilities induced by the rapid rotation of Saturn, and possibly, for the highest energy range, by contributions from the CRAND process acting inside Saturn's magnetosphere. Discussion of the transport and acceleration processes acting on these plasma sources shows the importance of rotation-induced radial transport and energization of the plasma, and also shows how much the unexpected planetary modulation of essentially all plasma parameters of Saturn's magnetosphere remains an unexplained mystery.

  18. Equivalent circuit effects on mode transitions in H{sub 2} inductively coupled plasmas

    SciTech Connect

    Xu, Hui-Jing; Zhao, Shu-Xia Zhang, Yu-Ru; Gao, Fei; Li, Xue-Chun; Wang, You-Nian

    2015-04-15

    It is well known experimentally that the circuit matching network plays an important role in the mode transition behavior of inductively coupled plasmas. To date, however, there have been no reports of numerical models being used to study the role of the matching circuit in the transition process. In this paper, a new two-dimensional self-consistent fluid model that couples the components of an equivalent circuit module is developed to investigate the effects of the equivalent circuit on the mode transition characteristics of an inductively coupled, hydrogen plasma. The equivalent circuit consists of a current source, impedance matching network, reactor impedance, and plasma transferred impedance. The nonlinear coupling of the external circuit with the internal plasma is investigated by adjusting the matching capacitance at a fixed input current. The electron density and temperature as well as the electromagnetic fields all change suddenly, and the E to H mode transition occurs abruptly at a certain matching capacitance as the impedance matching of the external circuit is varied. We also analyze the fields and the plasma characteristics during the transition process, especially for the case of the capacitive E mode.

  19. Mode transition in CF4 + Ar inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Liu, Wei; Gao, Fei; Zhao, Shu-Xia; Li, Xue-Chun; Wang, You-Nian

    2013-12-01

    The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF4 + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF4 increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF4 gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF4 at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF4 gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

  20. Effect of Inductive Coil Geometry on the Thrust Efficiency of a Microwave Assisted Discharge Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley; Polzin, Kurt; Emsellem, Gregory

    2012-01-01

    Pulsed inductive plasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductive plasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Discharge Inductive Plasma Accelerator (MAD-IPA) [4, 5] is a pulsed inductive plasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and permanent magnets that are arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the inductive coil is high. The use of a conical theta-pinch coil is under investigation. The conical geometry serves to provide neutral propellant containment and plasma plume focusing that is improved relative to the more common planar geometry of the Pulsed Inductive Thruster (PIT) [2, 3], however a conical coil imparts a direct radial acceleration of the current sheet that serves to rapidly decouple the propellant from the coil, limiting the direct axial electromagnetic acceleration in favor of an indirect acceleration mechanism that requires significant heating of the propellant within the volume bounded by the current sheet. In this paper, we describe thrust stand measurements performed to characterize the performance

  1. Surface plasma source with anode layer plasma accelerator

    SciTech Connect

    Dudnikov, Vadim

    2012-02-15

    Proposed plasma generation system can be used for high current negative ion beam production and for directed deposition by flux of sputtered neutrals and negative ions. The main mechanism of negative ion formation in surface plasma sources is the secondary emission from low work function surface bombarded by a flux of positive ion or neutrals. The emission of negative ions is enhanced significantly by introducing a small amount of cesium or other substance with low ionization potential. In the proposed source are used positive ions generated by Hall drift plasma accelerator (anode layer plasma accelerator or plasma accelerator with insulated channel, with cylindrical or race track configuration of emission slit). The target-emitter is bombarded by the ion beam accelerated in crossed ExB fields. Negative ions are extracted from the target surface with geometrical focusing and are accelerated by negative voltage applied between emitter and plasma, contacting with the plasma accelerator. Hall drift ion source has a special design with a space for passing of the emitted negative ions and sputtered particles through the positive ion source.

  2. Hollow-Cathode Source Generates Plasma

    NASA Technical Reports Server (NTRS)

    Deininger, W. D.; Aston, G.; Pless, L. C.

    1989-01-01

    Device generates argon, krypton, or xenon plasma via thermionic emission and electrical discharge within hollow cathode and ejects plasma into surrounding vacuum. Goes from cold start up to full operation in less than 5 s after initial application of power. Exposed to moist air between operations without significant degradation of starting and running characteristics. Plasma generated by electrical discharge in cathode barrel sustained and aided by thermionic emission from emitter tube. Emitter tube does not depend on rare-earth oxides, making it vulnerable to contamination by exposure to atmosphere. Device modified for use as source of plasma in laboratory experiments or industrial processes.

  3. Radio frequency line-plasma source using permanent magnets

    SciTech Connect

    Sakawa, Youichi; Yano, Kentaro; Shoji, Tatsuo

    2004-09-01

    A high-density and uniform line-plasma source is developed by an inductive rf discharge using a rectangular discharge chamber (200x100x20 mm) with a pair of permanent magnets placed on top and bottom of the chamber. Ion-saturation current-density J{sub is} profile is controlled by varying the width of the magnets and the distance between the antenna and the magnets. A 140-mm-wide plasma [plasma density {approx_equal}(1.8-2.5)x10{sup 12} cm{sup -3} for electron temperature =4-8 eV] of a uniformity variation within 90% is produced using a 140-mm-long antenna for an Ar pressure of 20 mTorr and a rf power of 3 kW. The measured J{sub is} profiles are explained by solving the equation of motion for electrons under a magnetic field structure of longitudinal line cusps.

  4. Measuring the Plasma Density of a Ferroelectric Plasma Source in an Expanding Plasma

    SciTech Connect

    A. Dunaevsky; N.J. Fisch

    2003-10-02

    The initial density and electron temperature at the surface of a ferroelectric plasma source were deduced from floating probe measurements in an expanding plasma. The method exploits negative charging of the floating probe capacitance by fast flows before the expanding plasma reaches the probe. The temporal profiles of the plasma density can be obtained from the voltage traces of the discharge of the charged probe capacitance by the ion current from the expanding plasma. The temporal profiles of the plasma density, at two different distances from the surface of the ferroelectric plasma source, could be further fitted by using the density profiles for the expanding plasma. This gives the initial values of the plasma density and electron temperature at the surface. The method could be useful for any pulsed discharge, which is accompanied by considerable electromagnetic noise, if the initial plasma parameters might be deduced from measurements in expanding plasma.

  5. A capillary discharge plasma source of intense VUV radiation

    SciTech Connect

    Sobel'man, Igor I; Shevelko, A P; Yakushev, O F; Knight, L V; Turley, R S

    2003-01-31

    The results of investigation of a capillary discharge plasma, used as a source of intense VUV radiation and soft X-rays, are presented. The plasma was generated during the discharge of low-inductance condensers in a gas-filled ceramic capillary. Intense line radiation was observed in a broad spectral range (30-400 A) in various gases (CO{sub 2}, Ne, Ar, Kr, Xe). The absolute radiation yield for the xenon discharge was {approx}5 mJ (2{pi} sr){sup -1} pulse{sup -1} within a spectral band of width 9 A at 135 A. Such a radiation source can be used for various practical applications, such as EUV projection lithography, microscopy of biological objects in a 'water window', reflectometry, etc. (special issue devoted to the 80th anniversary of academician n g basov's birth)

  6. Combination induction plasma tube and current concentrator for introducing a sample into a plasma

    DOEpatents

    Hull, Donald E.; Bieniewski, Thomas M.

    1988-01-01

    An induction plasma tube in combination with a current concentrator. The rent concentrator has a substantially cylindrical body having an open end and a partially closed end which defines an aperture. A first slot extends the longitudinal length of the cylindrical body and a second slot extends radially outward from the aperture. Together the first and second slots form a single L-shaped slot. The current concentrator is disposed within a volume bounded by an induction coil substantially along the axis thereof, and when power is applied to the induction coil a concentrated current is induced within the current concentrator aperture. The concentrator is moveable relative to the coil along the longitudinal axis of the coil to control the amount of current which is concentrated at the aperture.

  7. Meter scale plasma source for plasma wakefield experiments

    SciTech Connect

    Vafaei-Najafabadi, N.; Shaw, J. L.; Marsh, K. A.; Joshi, C.; Hogan, M. J.

    2012-12-21

    High accelerating gradients generated by a high density electron beam moving through plasma has been used to double the energy of the SLAC electron beam [1]. During that experiment, the electron current density was high enough to generate its own plasma without significant head erosion. In the newly commissioned FACET facility at SLAC, the peak current will be lower and without pre-ionization, head erosion will be a significant challenge for the planned experiments. In this work we report on our design of a meter scale plasma source for these experiments to effectively avoid the problem of head erosion. The plasma source is based on a homogeneous metal vapor gas column that is generated in a heat pipe oven [2]. A lithium oven over 30 cm long at densities over 10{sup 17} cm{sup -3} has been constructed and tested at UCLA. The plasma is then generated by coupling a 10 TW short pulse Ti:Sapphire laser into the gas column using an axicon lens setup. The Bessel profile of the axicon setup creates a region of high intensity that can stretch over the full length of the gas column with approximately constant diameter. In this region of high intensity, the alkali metal vapor is ionized through multi-photon ionization process. In this manner, a fully ionized meter scale plasma of uniform density can be formed. Methods for controlling the plasma diameter and length will also be discussed.

  8. Quantitative aspects of inductively coupled plasma mass spectrometry.

    PubMed

    Bulska, Ewa; Wagner, Barbara

    2016-10-28

    Accurate determination of elements in various kinds of samples is essential for many areas, including environmental science, medicine, as well as industry. Inductively coupled plasma mass spectrometry (ICP-MS) is a powerful tool enabling multi-elemental analysis of numerous matrices with high sensitivity and good precision. Various calibration approaches can be used to perform accurate quantitative measurements by ICP-MS. They include the use of pure standards, matrix-matched standards, or relevant certified reference materials, assuring traceability of the reported results. This review critically evaluates the advantages and limitations of different calibration approaches, which are used in quantitative analyses by ICP-MS. Examples of such analyses are provided.This article is part of the themed issue 'Quantitative mass spectrometry'. PMID:27644971

  9. Inductively Coupled Plasma Mass Spectrometry Uranium Error Propagation

    SciTech Connect

    Hickman, D P; Maclean, S; Shepley, D; Shaw, R K

    2001-07-01

    The Hazards Control Department at Lawrence Livermore National Laboratory (LLNL) uses Inductively Coupled Plasma Mass Spectrometer (ICP/MS) technology to analyze uranium in urine. The ICP/MS used by the Hazards Control Department is a Perkin-Elmer Elan 6000 ICP/MS. The Department of Energy Laboratory Accreditation Program requires that the total error be assessed for bioassay measurements. A previous evaluation of the errors associated with the ICP/MS measurement of uranium demonstrated a {+-} 9.6% error in the range of 0.01 to 0.02 {micro}g/l. However, the propagation of total error for concentrations above and below this level have heretofore been undetermined. This document is an evaluation of the errors associated with the current LLNL ICP/MS method for a more expanded range of uranium concentrations.

  10. Quantitative aspects of inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Bulska, Ewa; Wagner, Barbara

    2016-10-01

    Accurate determination of elements in various kinds of samples is essential for many areas, including environmental science, medicine, as well as industry. Inductively coupled plasma mass spectrometry (ICP-MS) is a powerful tool enabling multi-elemental analysis of numerous matrices with high sensitivity and good precision. Various calibration approaches can be used to perform accurate quantitative measurements by ICP-MS. They include the use of pure standards, matrix-matched standards, or relevant certified reference materials, assuring traceability of the reported results. This review critically evaluates the advantages and limitations of different calibration approaches, which are used in quantitative analyses by ICP-MS. Examples of such analyses are provided. This article is part of the themed issue 'Quantitative mass spectrometry'.

  11. Modified Babington nebulizer for inductively coupled plasma atomic emission spectrometry.

    PubMed

    Isoyama, Hirofumi; Uchida, Tetsuo; Nagashima, Takashi; Ohira, Osamu

    2003-04-01

    A PTFE Babingtonnebulizer equipped with a hood was investigated for inductively coupled plasma atomicemission spectrometry in conjunction with a PTFE cyclone chamber, in order to nebulize various sample solutions containing high salts, hydrofluoric acid and/or suspended solid. A hood of 3 mmphi (nozzle side) - 5 mmphi (outlet side) and 6 mm in length gave a comparable or higher sensitivity compared to a system with a commercially available concentric nebulizer and a glass cyclone chamber. Moreover, the present nebulizer was fully interchangeable with a concentric one at normal argon pressure, attaining sufficient stability, a short wash-out time and good nebulizing of high matrices solutions. The present system was successfully applied to the determination of trace impurities in highly pure silica powders.

  12. Bulk plasma fragmentation in a C{sub 4}F{sub 8} inductively coupled plasma: A hybrid modeling study

    SciTech Connect

    Zhao, Shu-Xia; Zhang, Yu-Ru; Gao, Fei; Wang, You-Nian; Bogaerts, Annemie

    2015-06-28

    A hybrid model is used to investigate the fragmentation of C{sub 4}F{sub 8} inductive discharges. Indeed, the resulting reactive species are crucial for the optimization of the Si-based etching process, since they determine the mechanisms of fluorination, polymerization, and sputtering. In this paper, we present the dissociation degree, the density ratio of F vs. C{sub x}F{sub y} (i.e., fluorocarbon (fc) neutrals), the neutral vs. positive ion density ratio, details on the neutral and ion components, and fractions of various fc neutrals (or ions) in the total fc neutral (or ion) density in a C{sub 4}F{sub 8} inductively coupled plasma source, as well as the effect of pressure and power on these results. To analyze the fragmentation behavior, the electron density and temperature and electron energy probability function (EEPF) are investigated. Moreover, the main electron-impact generation sources for all considered neutrals and ions are determined from the complicated C{sub 4}F{sub 8} reaction set used in the model. The C{sub 4}F{sub 8} plasma fragmentation is explained, taking into account many factors, such as the EEPF characteristics, the dominance of primary and secondary processes, and the thresholds of dissociation and ionization. The simulation results are compared with experiments from literature, and reasonable agreement is obtained. Some discrepancies are observed, which can probably be attributed to the simplified polymer surface kinetics assumed in the model.

  13. External control of electron energy distributions in a dual tandem inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Liu, Lei; Sridhar, Shyam; Zhu, Weiye; Donnelly, Vincent M.; Economou, Demetre J.; Logue, Michael D.; Kushner, Mark J.

    2015-08-01

    The control of electron energy probability functions (EEPFs) in low pressure partially ionized plasmas is typically accomplished through the format of the applied power. For example, through the use of pulse power, the EEPF can be modulated to produce shapes not possible under continuous wave excitation. This technique uses internal control. In this paper, we discuss a method for external control of EEPFs by transport of electrons between separately powered inductively coupled plasmas (ICPs). The reactor incorporates dual ICP sources (main and auxiliary) in a tandem geometry whose plasma volumes are separated by a grid. The auxiliary ICP is continuously powered while the main ICP is pulsed. Langmuir probe measurements of the EEPFs during the afterglow of the main ICP suggests that transport of hot electrons from the auxiliary plasma provided what is effectively an external source of energetic electrons. The tail of the EEPF and bulk electron temperature were then elevated in the afterglow of the main ICP by this external source of power. Results from a computer simulation for the evolution of the EEPFs concur with measured trends.

  14. External control of electron energy distributions in a dual tandem inductively coupled plasma

    SciTech Connect

    Liu, Lei; Sridhar, Shyam; Zhu, Weiye; Donnelly, Vincent M. Economou, Demetre J.; Logue, Michael D.; Kushner, Mark J.

    2015-08-28

    The control of electron energy probability functions (EEPFs) in low pressure partially ionized plasmas is typically accomplished through the format of the applied power. For example, through the use of pulse power, the EEPF can be modulated to produce shapes not possible under continuous wave excitation. This technique uses internal control. In this paper, we discuss a method for external control of EEPFs by transport of electrons between separately powered inductively coupled plasmas (ICPs). The reactor incorporates dual ICP sources (main and auxiliary) in a tandem geometry whose plasma volumes are separated by a grid. The auxiliary ICP is continuously powered while the main ICP is pulsed. Langmuir probe measurements of the EEPFs during the afterglow of the main ICP suggests that transport of hot electrons from the auxiliary plasma provided what is effectively an external source of energetic electrons. The tail of the EEPF and bulk electron temperature were then elevated in the afterglow of the main ICP by this external source of power. Results from a computer simulation for the evolution of the EEPFs concur with measured trends.

  15. Tin removal from extreme ultraviolet collector optics by inductively coupled plasma reactive ion etching

    SciTech Connect

    Shin, H.; Srivastava, S. N.; Ruzic, D. N.

    2008-05-15

    Tin (Sn) has the advantage of delivering higher conversion efficiency compared to other fuel materials (e.g., Xe or Li) in an extreme ultraviolet (EUV) source, a necessary component for the leading next generation lithography. However, the use of a condensable fuel in a lithography system leads to some additional challenges for maintaining a satisfactory lifetime of the collector optics. A critical issue leading to decreased mirror lifetime is the buildup of debris on the surface of the primary mirror that comes from the use of Sn in either gas discharge produced plasma (GDPP) or laser produced plasma (LPP). This leads to a decreased reflectivity from the added material thickness and increased surface roughness that contributes to scattering. Inductively coupled plasma reactive ion etching with halide ions is one potential solution to this problem. This article presents results for etch rate and selectivity of Sn over SiO{sub 2} and Ru. The Sn etch rate in a chlorine plasma is found to be much higher (of the order of hundreds of nm/min) than the etch rate of other materials. A thermally evaporated Sn on Ru sample was prepared and cleaned using an inductively coupled plasma etching method. Cleaning was confirmed using several material characterization techniques. Furthermore, a collector mock-up shell was then constructed and etching was performed on Sn samples prepared in a Sn EUV source using an optimized etching recipe. The sample surface before and after cleaning was analyzed by atomic force microscopy, x-ray photoelectron spectroscopy, and Auger electron spectroscopy. The results show the dependence of etch rate on the location of Sn samples placed on the collector mock-up shell.

  16. RF-Plasma Source Commissioning in Indian Negative Ion Facility

    SciTech Connect

    Singh, M. J.; Bandyopadhyay, M.; Yadava, Ratnakar; Chakraborty, A. K.; Bansal, G.; Gahlaut, A.; Soni, J.; Kumar, Sunil; Pandya, K.; Parmar, K. G.; Sonara, J.; Kraus, W.; Heinemann, B.; Riedl, R.; Obermayer, S.; Martens, C.; Franzen, P.; Fantz, U.

    2011-09-26

    The Indian program of the RF based negative ion source has started off with the commissioning of ROBIN, the inductively coupled RF based negative ion source facility under establishment at Institute for Plasma research (IPR), India. The facility is being developed under a technology transfer agreement with IPP Garching. It consists of a single RF driver based beam source (BATMAN replica) coupled to a 100 kW, 1 MHz RF generator with a self excited oscillator, through a matching network, for plasma production and ion extraction and acceleration. The delivery of the RF generator and the RF plasma source without the accelerator, has enabled initiation of plasma production experiments. The recent experimental campaign has established the matching circuit parameters that result in plasma production with density in the range of 0.5-1x10{sup 18}/m{sup 3}, at operational gas pressures ranging between 0.4-1 Pa. Various configurations of the matching network have been experimented upon to obtain a stable operation of the set up for RF powers ranging between 25-85 kW and pulse lengths ranging between 4-20 s. It has been observed that the range of the parameters of the matching circuit, over which the frequency of the power supply is stable, is narrow and further experiments with increased number of turns in the coil are in the pipeline to see if the range can be widened. In this paper, the description of the experimental system and the commissioning data related to the optimisation of the various parameters of the matching network, to obtain stable plasma of required density, are presented and discussed.

  17. RF-Plasma Source Commissioning in Indian Negative Ion Facility

    NASA Astrophysics Data System (ADS)

    Singh, M. J.; Bandyopadhyay, M.; Bansal, G.; Gahlaut, A.; Soni, J.; Kumar, Sunil; Pandya, K.; Parmar, K. G.; Sonara, J.; Yadava, Ratnakar; Chakraborty, A. K.; Kraus, W.; Heinemann, B.; Riedl, R.; Obermayer, S.; Martens, C.; Franzen, P.; Fantz, U.

    2011-09-01

    The Indian program of the RF based negative ion source has started off with the commissioning of ROBIN, the inductively coupled RF based negative ion source facility under establishment at Institute for Plasma research (IPR), India. The facility is being developed under a technology transfer agreement with IPP Garching. It consists of a single RF driver based beam source (BATMAN replica) coupled to a 100 kW, 1 MHz RF generator with a self excited oscillator, through a matching network, for plasma production and ion extraction and acceleration. The delivery of the RF generator and the RF plasma source without the accelerator, has enabled initiation of plasma production experiments. The recent experimental campaign has established the matching circuit parameters that result in plasma production with density in the range of 0.5-1×1018/m3, at operational gas pressures ranging between 0.4-1 Pa. Various configurations of the matching network have been experimented upon to obtain a stable operation of the set up for RF powers ranging between 25-85 kW and pulse lengths ranging between 4-20 s. It has been observed that the range of the parameters of the matching circuit, over which the frequency of the power supply is stable, is narrow and further experiments with increased number of turns in the coil are in the pipeline to see if the range can be widened. In this paper, the description of the experimental system and the commissioning data related to the optimisation of the various parameters of the matching network, to obtain stable plasma of required density, are presented and discussed.

  18. Plasma-based EUV light source

    DOEpatents

    Shumlak, Uri; Golingo, Raymond; Nelson, Brian A.

    2010-11-02

    Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

  19. Thrust Stand Measurements of the Microwave Assisted Discharge Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.; Emsellem, Gregory D.

    2011-01-01

    Pulsed inductive plasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. This type of pulsed thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductive plasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Dis- charge Inductive Plasma Accelerator (MAD-IPA), shown in Fig. 1, is a pulsed inductive plasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil before the main current pulse via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and a static magnetic field from a set of permanent magnets arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the theta-pinch coil is high. The use of a conical theta-pinch coil also serves to provide neutral propellant containment and plasma plume focusing that is improved relative to the more common planar geometry of the Pulsed Inductive Thruster (PIT) [1, 2]. In this paper, we describe thrust stand measurements performed to characterize the performance (specific impulse, thrust efficiency) of the MAD-IPA thruster. Impulse data are obtained at various pulse energies, mass flow rates and inductive coil geometries. Dependencies on these experimental parameters are discussed in the context of the current sheet formation and electromagnetic plasma

  20. Air Plasma Source for Biomedical Applications

    NASA Astrophysics Data System (ADS)

    Henriques, J.; Tatarova, E.; Dias, F. M.; Ferreira, C. M.; Gordiets, B.; IPFN-IST, 1049-001 LX, Portugal Team; Lebedev Physical Institute of the Russian Academy of Sciences Team

    2011-10-01

    Plasma interactions with living matter are presently at the frontiers of plasma research and development. Plasmas contain numerous agents that influence biological activity. They provide essentially two types of biocidal species: reactive species, such as oxygen atoms that lead to lethality of micro-organisms through erosion, and UV radiation that can damage the DNA strands. In this work we investigate a surface wave (2.45 GHz) driven discharge plasma in air, with a small admixture of water vapor, as a source of ground state O(3P) oxygen atoms, NO molecules and UV radiation. A theoretical model describing both the wave driven discharge zone and its flowing afterglow is used to analyze the performance of this plasma source. The predicted plasma-generated NO(X) and O(3P) concentrations and NO(γ) radiation intensity along the source are presented and discussed as a function of the microwave power and water vapor percentage in the gas mixture. To validate the theoretical predictions, the relative concentrations of species have been determined by Mass Spectrometry, Fourier Transform Infrared Spectroscopy and Optical Spectroscopy. Acknowledgment: This work was funded by the Portuguese Foundation for Science and Technology, under research contract PTDC/FIS/108411/2008.

  1. A commercial plasma source ion implantation facility

    SciTech Connect

    Scheuer, J.T.; Adler, R.A.; Horne, W.G.

    1996-10-01

    Empire Hard Chrome has recently installed commercial plasma source ion implantation (PSU) equipment built by North Star Research Corporation. Los Alamos National Laboratory has assisted in this commercialization effort via two Cooperative Research and Development Agreements to develop the plasma source for the equipment and to identify low-risk commercial PSII applications. The PSII system consists of a 1 m x 1 m cylindrical vacuum chamber with a rf plasma source. The pulse modulator is capable of delivering pulses kV and peak currents of 300 A at maximum repetition rate of 400 Hz. thyratron tube to switch a pulse forming network which is tailored to match the dynamic PSII load. In this paper we discuss the PSII system, process facility, and early commercial applications to production tooling.

  2. Positive and negative chlorine ion kinetics in inductively-coupled Cl{sub 2}BCl{sub 3} plasmas

    SciTech Connect

    Fleddermann, C.B.; Hebner, G.A.

    1997-05-01

    Discharges in gas mixtures of Cl{sub 2}, BCl{sub 3}, Ar, and N{sub 2} are used by the integrated circuit industry for metal etching, and are as yet not well understood, especially in inductively-coupled plasma (ICP) sources which are rapidly becoming the industry standard for etching tools. An essential parameter that must be measured in these plasmas is the density of ions, both positive and negative, formed in the plasma. In the work presented here, LIF and laser photodetachment were used to measure relative metastable chlorine ion CL{sup +}* density and temperature and absolute Cl{sup {minus}} density as a function of gas mixture.

  3. Effect of Inductive Coil Geometry and Current Sheet Trajectory of a Conical Theta Pinch Pulsed Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.; Bonds, Kevin W.; Emsellem, Gregory D.

    2011-01-01

    Results are presented demonstrating the e ect of inductive coil geometry and current sheet trajectory on the exhaust velocity of propellant in conical theta pinch pulsed induc- tive plasma accelerators. The electromagnetic coupling between the inductive coil of the accelerator and a plasma current sheet is simulated, substituting a conical copper frustum for the plasma. The variation of system inductance as a function of plasma position is obtained by displacing the simulated current sheet from the coil while measuring the total inductance of the coil. Four coils of differing geometries were employed, and the total inductance of each coil was measured as a function of the axial displacement of two sep- arate copper frusta both having the same cone angle and length as the coil but with one compressed to a smaller size relative to the coil. The measured relationship between total coil inductance and current sheet position closes a dynamical circuit model that is used to calculate the resulting current sheet velocity for various coil and current sheet con gura- tions. The results of this model, which neglects the pinching contribution to thrust, radial propellant con nement, and plume divergence, indicate that in a conical theta pinch ge- ometry current sheet pinching is detrimental to thruster performance, reducing the kinetic energy of the exhausting propellant by up to 50% (at the upper bound for the parameter range of the study). The decrease in exhaust velocity was larger for coils and simulated current sheets of smaller half cone angles. An upper bound for the pinching contribution to thrust is estimated for typical operating parameters. Measurements of coil inductance for three di erent current sheet pinching conditions are used to estimate the magnetic pressure as a function of current sheet radial compression. The gas-dynamic contribution to axial acceleration is also estimated and shown to not compensate for the decrease in axial electromagnetic acceleration

  4. Diagnostics of O Atoms in Inductively Coupled O2 Plasma Employing Vacuum Ultraviolet Absorption Spectroscopy

    NASA Astrophysics Data System (ADS)

    Nagai, Hisao; Hori, Masaru; Goto, Toshio; Hiramatsu, Mineo; Takashima, Seigou

    2002-10-01

    The compact measurement system for absolute densities of oxygen (O) atom has been developed employing a vacuum ultraviolet absorption spectroscopy (VUVAS) technique with a high-pressure micro-discharge hollow cathode lamp (MHCL) as a light source. The influences of self-absorption, emission line profiles of the MHCL, and the background absorption on determination of absolute O atom density were investigated. This system has been applied for measuring of absolute O atom densities in an inductively coupled O2 plasma. O atom densities were estimated to be on the order of 4 x 10^11 -4 x 10^12 cm-3, at an O2 pressure ranging from 1.3 to 26.7 Pa. The behavior of O atom density measured using VUVAS technique was consistent with that obtained by actinometry technique using 844.6 nm and 777.2 nm. Moreover, the lifetime of O atom in the afterglow plasma has been investigated. The decay curves of the O atom density were fitted with exponential functions. The extinction process of O atom in the inductively coupled O2 plasma is discussed.

  5. Advances in Plasma-Filled Microwave Sources

    NASA Astrophysics Data System (ADS)

    Goebel, Dan M.

    1998-11-01

    Significant improvements in the performance of high power microwave tubes have been achieved in recent years by the introduction of plasma into the beam- coupling structures of the devices. Plasma has been credited with increasing the maximum electron beam current, frequency bandwidth, electrical efficiency and reducing or eliminating the need for guiding magnetic fields in microwave sources. These advances are critically important for the development of high power, frequency agile microwave systems where size and weight are important. Conversely, plasma has been blamed for causing noise, instabilities, power variations and pulse-length limitations in microwave tubes for many years. Recent experimental and theoretical studies have demonstrated that introducing the right amount of plasma in a controlled manner can be beneficial in the areas described above. Enhanced beam propagation at lower magnetic fields and higher beam current levels due to the space-charge neutralization by plasma can be realized provided that the neutralization fraction is fairly stable and maintained near a value of one for the duration of the desired pulse length. The generation of hybrid waves in plasma-filled slow-wave structures (SWS) operating near cutoff has resulted in an increased electric field on axis and improved coupling to solid beams in both helix and coupled-cavity SWS, and wider coupling-aperture pass-bands and frequency bandwidth in coupled-cavity devices. In the event of excess plasma generation in these TWTs or BWOs, the device structures rapidly approach cutoff or breakdown and the beam forms instabilities, which degrades the output power level and pulse length. Recent experimental and theoretical advances in this field including plasma implementation techniques in the gun and circuit will be presented, and the benefits and limitations of plasma filling of microwave sources will be shown and discussed.

  6. High Resolution Studies of the Origins of Polyatomic Ions in Inductively Coupled Plasma-Mass Spectrometry

    SciTech Connect

    Ferguson, Jill Wisnewski

    2006-01-01

    The inductively coupled plasma (ICP) is an atmospheric pressure ionization source. Traditionally, the plasma is sampled via a sampler cone. A supersonic jet develops behind the sampler, and this region is pumped down to a pressure of approximately one Torr. A skimmer cone is located inside this zone of silence to transmit ions into the mass spectrometer. The position of the sampler and skimmer cones relative to the initial radiation and normal analytical zones of the plasma is key to optimizing the useful analytical signal [1]. The ICP both atomizes and ionizes the sample. Polyatomic ions form through ion-molecule interactions either in the ICP or during ion extraction [l]. Common polyatomic ions that inhibit analysis include metal oxides (MO+), adducts with argon, the gas most commonly used to make up the plasma, and hydride species. While high resolution devices can separate many analytes from common interferences, this is done at great cost in ion transmission efficiency--a loss of 99% when using high versus low resolution on the same instrument [2]. Simple quadrupole devices, which make up the bulk of ICP-MS instruments in existence, do not present this option. Therefore, if the source of polyatomic interferences can be determined and then manipulated, this could potentially improve the figures of merit on all ICP-MS devices, not just the high resolution devices often utilized to study polyatomic interferences.

  7. Anisotropic pattern transfer in ultrananocrystalline diamond films by inductively coupled plasma etching.

    PubMed

    Park, Jong Cheon; Kim, Seong Hak; Cha, Seung Uk; Jeong, Geun; Kim, Tae Gyu; Kim, Jin Kon; Cho, Hyun

    2014-12-01

    High density plasma etching of ultrananocrystalline diamond (UNCD) films wasperformed in O2 and O2/Ar inductively coupled plasma (ICP) discharges. The O2/Ar ICP discharges produced higher etch rates due to enhanced physical component of the etching, and a maximum etch rate of -280 nm/min was obtained in 10 sccm O2/5 sccm Ar discharges. Very high etch selectivities up to -140:1 were obtained for the UNCD over Al mask layer. Anisotropic pattern transfer with a vertical sidewall profile was achieved in the 10 sccm O2/5 sccm Ar discharges at a relatively low source power (300 W) and a moderate rf chuck power (200 W). PMID:25971013

  8. Multielement analysis of geologic materials by inductively coupled plasma-atomic emission spectroscopy

    SciTech Connect

    Christensen, O.D.; Kroneman, R.L.; Capuano, R.M.

    1980-03-01

    Atomic emission spectroscopy using an inductively coupled plasma (ICP) source permits the rapid acquisition of multielement geochemical data from a wide variety of geologic materials. Rocks or other solid samples are taken into solution with a four acid digestion procedure and introduced directly into the plasma; fluid samples are acidified or analyzed directly. The entire process is computer-controlled, fully-automated, and requires less than five minutes per sample for quantitative determination of 37 elements. The procedures and instrumentation employed at the ESL for multielement ICP analysis of geologic materials are described and these are intended as a guide for evaluating analytic results reported from this laboratory. The quality of geochemical data can be characterized by precision, limits of quantitative determination, and accuracy. Precision values are a measure of the repeatability of analyses. In general, major element and analyses have precision of better than 5% and trace elements of better than 10% of the amount present. (MHR)

  9. Inductively Coupled Plasma Mass Spectrometry (ICP-MS) and its Application in Life Sciences

    NASA Astrophysics Data System (ADS)

    Xu, Gu-feng; Wang, Hong-mei

    2001-08-01

    Inductively-coupled plasma mass spectrometry (ICP-MS) has made much progress since its birth in the late 1990s. This paper will give a rather systematic overview on the use of this technique in new devices and technologies related to plasma source, sample-introducing device and detecting spectrometer etc. In this overview, an emphasis will be put on the evaluation of the ICP-MS technique in combination with a series of physical, chemical and biological techniques, such as laser ablation (LA), capillary electrophoresis (CE) and high performance liquid chromatograph (HPLC), along with their representative high accuracy and high sensitivity. Finally, comprehensive and fruitful applications of the ICP-MS and its combinative techniques in the detection of trace metallic elements and isotopes in complex biological and environmental samples will be revealed.

  10. Aerosol detection efficiency in inductively coupled plasma mass spectrometry

    DOE PAGESBeta

    Hubbard, Joshua A.; Zigmond, Joseph A.

    2016-03-02

    We used an electrostatic size classification technique to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Moreover, we counted size-segregated particles with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized bymore » the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10-5 to 10-11. Free molecular heat and mass transfer theory was

  11. Aerosol detection efficiency in inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Hubbard, Joshua A.; Zigmond, Joseph A.

    2016-05-01

    An electrostatic size classification technique was used to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Size-segregated particles were counted with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized by the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10- 5 to 10- 11. Free molecular heat and mass transfer theory was applied, but

  12. Key issues in plasma source ion implantation

    SciTech Connect

    Rej, D.J.; Faehl, R.J.; Matossian, J.N.

    1996-09-01

    Plasma source ion implantation (PSII) is a scaleable, non-line-of-sight method for the surface modification of materials. In this paper, we consider three important issues that should be addressed before wide-scale commercialization of PSII: (1) implant conformality; (2) ion sources; and (3) secondary electron emission. To insure uniform implanted dose over complex shapes, the ion sheath thickness must be kept sufficiently small. This criterion places demands on ion sources and pulsed-power supplies. Another limitation to date is the availability of additional ion species beyond B, C, N, and 0. Possible solutions are the use of metal arc vaporization sources and plasma discharges in high-vapor-pressure organometallic precursors. Finally, secondary electron emission presents a potential efficiency and x-ray hazard issue since for many metallurgic applications, the emission coefficient can be as large as 20. Techniques to suppress secondary electron emission are discussed.

  13. Ion Beam Plasma Interactions in the ASTRAL Helicon Plasma Source.

    NASA Astrophysics Data System (ADS)

    Boivin, R. F.; Kesterson, A.; Kamar, O.; Lin, Y.; Munoz, J.; Wang, X.

    2008-11-01

    A 100 KeV NEC duoplasmatron is used to produce an energetic ion beam (10 KeV < E < 100 KeV). The beam is sent through plasmas produced by the ASTRAL helicon plasma source. The beam current and beam size are measured by a device combining Retarding Field Analyzer (RFA) and Faraday Cup (FC) features. ASTRAL produces bright intense He/Ne/Ar plasmas with the following parameters: ne = 1E11 -- 1E13 cm-3 and Te = 2 - 10 eV, B-field < 1.3 kGauss, rf power <= 2 kWatt. RF compensated Langmuir probes are used to measure Te and ne. Depending on the ion beam energy and the ratio of beam density over plasma density different wave instabilities will be generated within the plasmas. A real-time spectrum analyzer will be used to identify the wave instabilities and their evolution in the plasma. We will present early experimental results together with some preliminary theoretical simulation using 2D and 3D hybrid simulation codes. In these codes, ions are treated as fully kinetic particles while electrons are treated as a fluid. Both species are moving in a self-consistent electromagnetic field.

  14. Feedback control of plasma electron density and ion energy in an inductively coupled plasma etcher

    SciTech Connect

    Lin Chaung; Leou, K.-C.; Huang, H.-M.; Hsieh, C.-H.

    2009-01-15

    Here the authors report the development of a fuzzy logic based feedback control of the plasma electron density and ion energy for high density plasma etch process. The plasma electron density was measured using their recently developed transmission line microstrip microwave interferometer mounted on the chamber wall, and the rf voltage was measured by a commercial impedance meter connected to the wafer stage. The actuators were two 13.56 MHz rf power generators which provided the inductively coupled plasma power and bias power, respectively. The control system adopted the fuzzy logic control algorithm to reduce frequent actuator action resulting from measurement noise. The experimental results show that the first wafer effect can be eliminated using closed-loop control for both poly-Si and HfO{sub 2} etching. In particular, for the HfO2 etch, the controlled variables in this work were much more effective than the previous one where ion current was controlled, instead of the electron density. However, the pressure disturbance effect cannot be reduced using plasma electron density feedback.

  15. Feedback control of chlorine inductively coupled plasma etch processing

    SciTech Connect

    Lin Chaung; Leou, K.-C.; Shiao, K.-M.

    2005-03-01

    Feedback control has been applied to poly-Si etch processing using a chlorine inductively coupled plasma. Since the positive ion flux and ion energy incident upon the wafer surface are the key factors that influence the etch rate, the ion current and the root mean square (rms) rf voltage on the wafer stage, which are measured using an impedance meter connected to the wafer stage, are adopted as the controlled variables to enhance etch rate. The actuators are two 13.56 MHz rf power generators, which adjust ion density and ion energy, respectively. The results of closed-loop control show that the advantages of feedback control can be achieved. For example, with feedback control, etch rate variation under the transient chamber wall condition is reduced roughly by a factor of 2 as compared to the open-loop case. In addition, the capability of the disturbance rejection was also investigated. For a gas pressure variation of 20%, the largest etch rate variation is about 2.4% with closed-loop control as compared with as large as about 6% variation using open-loop control. Also the effect of ion current and rms rf voltage on etch rate was studied using 2{sup 2} factorial design whose results were used to derive a model equation. The obtained formula was used to adjust the set point of ion current and rf voltage so that the desired etch rate was obtained.

  16. Uranium quantification in semen by inductively coupled plasma mass spectrometry.

    PubMed

    Todorov, Todor I; Ejnik, John W; Guandalini, Gustavo; Xu, Hanna; Hoover, Dennis; Anderson, Larry; Squibb, Katherine; McDiarmid, Melissa A; Centeno, Jose A

    2013-01-01

    In this study we report uranium analysis for human semen samples. Uranium quantification was performed by inductively coupled plasma mass spectrometry. No additives, such as chymotrypsin or bovine serum albumin, were used for semen liquefaction, as they showed significant uranium content. For method validation we spiked 2g aliquots of pooled control semen at three different levels of uranium: low at 5 pg/g, medium at 50 pg/g, and high at 1000 pg/g. The detection limit was determined to be 0.8 pg/g uranium in human semen. The data reproduced within 1.4-7% RSD and spike recoveries were 97-100%. The uranium level of the unspiked, pooled control semen was 2.9 pg/g of semen (n=10). In addition six semen samples from a cohort of Veterans exposed to depleted uranium (DU) in the 1991 Gulf War were analyzed with no knowledge of their exposure history. Uranium levels in the Veterans' semen samples ranged from undetectable (<0.8 pg/g) to 3350 pg/g. This wide concentration range for uranium in semen is consistent with known differences in current DU body burdens in these individuals, some of whom have retained embedded DU fragments.

  17. Design and Testing of a Small Inductive Pulsed Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Martin, Adam K.; Dominguez, Alexandra; Eskridge, Richard H.; Polzin, Kurt A.; Riley, Daniel P.; Perdue, Kevin A.

    2015-01-01

    The design and testing of a small inductive pulsed plasma thruster (IPPT) is described. The device was built as a test-bed for the pulsed gas-valves and solid-state switches required for a thruster of this kind, and was designed to be modular to facilitate modification. The thruster in its present configuration consists of a multi-turn, spiral-wound acceleration coil (270 millimeters outer diameter, 100 millimeters inner diameter) driven by a 10 microfarad capacitor and switched with a high-voltage thyristor, a propellant delivery system including a fast pulsed gas-valve, and a glow-discharge pre-ionizer circuit. The acceleration coil circuit may be operated at voltages up to 4 kilovolts (the thyristor limit is 4.5 kilovolts) and the thruster operated at cyclic-rates up to 30 Herz. Initial testing of the thruster, both bench-top and in-vacuum, has been performed. Cyclic operation of the complete device was demonstrated (at 2 Herz), and a number of valuable insights pertaining to the design of these devices have been gained.

  18. Dynamics of inductively-coupled pulsed chlorine plasmas in the presence of continuous substrate bias

    NASA Astrophysics Data System (ADS)

    Malyshev, M. V.; Donnelly, V. M.

    2000-08-01

    We report an analysis of the dynamics of a pulsed power, inductively-coupled chlorine plasma operated with continuous radio frequency (rf) bias applied to the substrate stage. A comparison of pulsed plasmas operated with and without 12.5 MHz rf bias is performed through an investigation of the time dependences of electron (ne) and positive ion (ni+) densities and electron temperatures (Te), measured with a Langmuir probe in a 10 mTorr Cl2 plasma. There is no significant difference in the plasma characteristics with or without bias during the on portion of the power modulation of the source. Once the source power is turned off, Te initially decreases rapidly, and ne and ni+ decay slowly, independent of the presence of the rf bias. About 25 µs into this decay, when Te is about 0.5 eV (and would continue to decay in the absence of the rf bias), the presence of the rf bias (70-100 W) causes Te to increase rapidly and reach values higher than those recorded at the end of the on portion. Meanwhile, ne and ni+ continue to decay, independent of substrate bias. Only much later in the afterglow are charge densities affected by bias. About 50 µs into the off period, ne with added substrate bias is lower than with no bias. If the off period is sufficiently long, the plasma in the presence of the rf bias transforms into a so-called reactive ion etching (RIE) mode that is generated and sustained solely by the capacitively-coupled bias power. This occurs rather abruptly when ni+ decays to the level of positive ion density for RIE operation (i.e. with the stage powered and the source power off). Since ne at this instant has decayed well below the electron density during RIE operation, it rapidly increases when this transition occurs. The behaviour of Te in the off portion of the pulsed plasma indicates that the presence of rf bias prevents the sheath collapse that occurs without bias. Since this will prevent negative ions (Cl-) from reaching the wafer, the reduced plasma

  19. Plasma wake field XUV radiation source

    DOEpatents

    Prono, Daniel S.; Jones, Michael E.

    1997-01-01

    A XUV radiation source uses an interaction of electron beam pulses with a gas to create a plasma radiator. A flowing gas system (10) defines a circulation loop (12) with a device (14), such as a high pressure pump or the like, for circulating the gas. A nozzle or jet (16) produces a sonic atmospheric pressure flow and increases the density of the gas for interacting with an electron beam. An electron beam is formed by a conventional radio frequency (rf) accelerator (26) and electron pulses are conventionally formed by a beam buncher (28). The rf energy is thus converted to electron beam energy, the beam energy is used to create and then thermalize an atmospheric density flowing gas to a fully ionized plasma by interaction of beam pulses with the plasma wake field, and the energetic plasma then loses energy by line radiation at XUV wavelengths Collection and focusing optics (18) are used to collect XUV radiation emitted as line radiation when the high energy density plasma loses energy that was transferred from the electron beam pulses to the plasma.

  20. Vacuum arc plasma thrusters with inductive energy storage driver

    NASA Technical Reports Server (NTRS)

    Krishnan, Mahadevan (Inventor)

    2009-01-01

    A plasma thruster with a cylindrical inner and cylindrical outer electrode generates plasma particles from the application of energy stored in an inductor to a surface suitable for the formation of a plasma and expansion of plasma particles. The plasma production results in the generation of charged particles suitable for generating a reaction force, and the charged particles are guided by a magnetic field produced by the same inductor used to store the energy used to form the plasma.

  1. Plasma ignition and steady state simulations of the Linac4 H{sup −} ion source

    SciTech Connect

    Mattei, S. Lettry, J.; Grudiev, A.; Ohta, M.; Yasumoto, M.; Hatayama, A.

    2014-02-15

    The RF heating of the plasma in the Linac4 H{sup −} ion source has been simulated using a particle-in-cell Monte Carlo collision method. This model is applied to investigate the plasma formation starting from an initial low electron density of 10{sup 12} m{sup −3} and its stabilization at 10{sup 18} m{sup −3}. The plasma discharge at low electron density is driven by the capacitive coupling with the electric field generated by the antenna, and as the electron density increases the capacitive electric field is shielded by the plasma and induction drives the plasma heating process. Plasma properties such as e{sup −}/ion densities and energies, sheath formation, and shielding effect are presented and provide insight to the plasma properties of the hydrogen plasma.

  2. A 5 kA pulsed power supply for inductive and plasma loads in large volume plasma device.

    PubMed

    Srivastava, P K; Singh, S K; Sanyasi, A K; Awasthi, L M; Mattoo, S K

    2016-07-01

    This paper describes 5 kA, 12 ms pulsed power supply for inductive load of Electron Energy Filter (EEF) in large volume plasma device. The power supply is based upon the principle of rapid sourcing of energy from the capacitor bank (2.8 F/200 V) by using a static switch, comprising of ten Insulated Gate Bipolar Transistors (IGBTs). A suitable mechanism is developed to ensure equal sharing of current and uniform power distribution during the operation of these IGBTs. Safe commutation of power to the EEF is ensured by the proper optimization of its components and by the introduction of over voltage protection (>6 kV) using an indigenously designed snubber circuit. Various time sequences relevant to different actions of power supply, viz., pulse width control and repetition rate, are realized through optically isolated computer controlled interface. PMID:27475553

  3. A 5 kA pulsed power supply for inductive and plasma loads in large volume plasma device

    NASA Astrophysics Data System (ADS)

    Srivastava, P. K.; Singh, S. K.; Sanyasi, A. K.; Awasthi, L. M.; Mattoo, S. K.

    2016-07-01

    This paper describes 5 kA, 12 ms pulsed power supply for inductive load of Electron Energy Filter (EEF) in large volume plasma device. The power supply is based upon the principle of rapid sourcing of energy from the capacitor bank (2.8 F/200 V) by using a static switch, comprising of ten Insulated Gate Bipolar Transistors (IGBTs). A suitable mechanism is developed to ensure equal sharing of current and uniform power distribution during the operation of these IGBTs. Safe commutation of power to the EEF is ensured by the proper optimization of its components and by the introduction of over voltage protection (>6 kV) using an indigenously designed snubber circuit. Various time sequences relevant to different actions of power supply, viz., pulse width control and repetition rate, are realized through optically isolated computer controlled interface.

  4. Light source employing laser-produced plasma

    SciTech Connect

    Tao, Yezheng; Tillack, Mark S

    2013-09-17

    A system and a method of generating radiation and/or particle emissions are disclosed. In at least some embodiments, the system includes at least one laser source that generates a first pulse and a second pulse in temporal succession, and a target, where the target (or at least a portion the target) becomes a plasma upon being exposed to the first pulse. The plasma expand after the exposure to the first pulse, the expanded plasma is then exposed to the second pulse, and at least one of a radiation emission and a particle emission occurs after the exposure to the second pulse. In at least some embodiments, the target is a solid piece of material, and/or a time period between the first and second pulses is less than 1 microsecond (e.g., 840 ns).

  5. A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

    SciTech Connect

    Kim, Young-Do; Lee, Hyo-Chang; Chung, Chin-Wook

    2013-09-15

    Correlations between the external discharge parameters (the driving frequency ω and the chamber dimension R) and plasma characteristics (the skin depth δ and the electron-neutral collision frequency ν{sub m}) are studied using the transformer circuit model [R. B. Piejak et al., Plasma Sources Sci. Technol. 1, 179 (1992)] when the absorbed power is maximized in an inductively coupled plasma. From the analysis of the transformer circuit model, the maximum power transfer conditions, which depend on the external discharge parameters and the internal plasma characteristics, were obtained. It was found that a maximum power transfer occurs when δ≈0.38R for the discharge condition at which ν{sub m}/ω≪1, while it occurs when δ≈√(2)√(ω/ν{sub m})R for the discharge condition at which ν{sub m}/ω≫1. The results of this circuit analysis are consistent with the stable last inductive mode region of an inductive-to-capacitive mode transition [Lee and Chung, Phys. Plasmas 13, 063510 (2006)], which was theoretically derived from Maxwell's equations. Our results were also in agreement with the experimental results. From this work, we demonstrate that a simple circuit analysis can be applied to explain complex physical phenomena to a certain extent.

  6. A study on the maximum power transfer condition in an inductively coupled plasma using transformer circuit model

    NASA Astrophysics Data System (ADS)

    Kim, Young-Do; Lee, Hyo-Chang; Chung, Chin-Wook

    2013-09-01

    Correlations between the external discharge parameters (the driving frequency ω and the chamber dimension R) and plasma characteristics (the skin depth δ and the electron-neutral collision frequency νm) are studied using the transformer circuit model [R. B. Piejak et al., Plasma Sources Sci. Technol. 1, 179 (1992)] when the absorbed power is maximized in an inductively coupled plasma. From the analysis of the transformer circuit model, the maximum power transfer conditions, which depend on the external discharge parameters and the internal plasma characteristics, were obtained. It was found that a maximum power transfer occurs when δ ≈0.38R for the discharge condition at which νm/ω ≪1, while it occurs when δ ≈√2 √ω /νm R for the discharge condition at which νm/ω ≫1. The results of this circuit analysis are consistent with the stable last inductive mode region of an inductive-to-capacitive mode transition [Lee and Chung, Phys. Plasmas 13, 063510 (2006)], which was theoretically derived from Maxwell's equations. Our results were also in agreement with the experimental results. From this work, we demonstrate that a simple circuit analysis can be applied to explain complex physical phenomena to a certain extent.

  7. Design and Testing of a Small Inductive Pulsed Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Martin, Adam K.; Eskridge, Richard H.; Dominguez, Alexandra; Polzin, Kurt A.; Riley, Daniel P.; Kimberlin, Adam C.

    2015-01-01

    The design and testing of a small inductive pulsed plasma thruster (IPPT), shown in Fig. 1 with all the major subsystems required for a thruster of this kind are described. Thrust measurements and imaging of the device operated in rep-rated mode are presented to quantify the performance envelope of the device. The small IPPT described in this paper was designed to serve as a test-bed for the pulsed gas-valves and solid-state switches required for a IPPTs. A modular design approach was used to permit future modifications and upgrades. The thruster consists of the following sub-systems: a) a multi-turn, spiral-wound acceleration coil (27 cm o.d., 10 cm i.d.) driven by a 10 microFarad capacitor and switched with a high-voltage thyristor, b) a fast pulsed gas-valve, and c.) a glow-discharge pre-ionizer (PI) circuit. The acceleration-coil circuit may be operated at voltages up to 4 kV (the thyristor limit is 4.5 kV). The device may be operated at rep-rates up to 30 Hz with the present gas-valve. Thrust measurements and imaging of the device operated in rep-rated mode will be presented. The pre-ionizer consists of a 0.3 microFarad capacitor charged to 4 kV and connected to two annular stainless-steel electrodes bounding the area of the coil-face. The 4 kV potential is held across them and when the gas is puffed in over the coil, the PI circuit is completed, and a plasma is formed. Even at the less than optimal base-pressure in the chamber (approximately 5 × 10(exp -4) torr), the PI held-off the applied voltage, and only discharged upon command. For a capacitor charge of 2 kV the peak coil current is 4.1 kA, and during this pulse a very bright discharge (much brighter than from the PI alone) was observed (see Fig. 2). Interestingly, for discharges at this charge voltage the PI was not required as the current rise rate, dI/dt, of the coil itself was sufficient to ionize the gas.

  8. Inductively Coupled Plasma-Mass Spectrometry and the European Discovery of America

    NASA Astrophysics Data System (ADS)

    Houk, R. S.

    2000-05-01

    The background and initial experimental results in inductively coupled plasma-mass spectrometry (ICP-MS) are juxtaposed with similar events from the voyages of Christopher Columbus, particularly with the first voyage.

  9. Helicon Plasma Source Optimization Studies for VASIMR

    NASA Technical Reports Server (NTRS)

    Goulding, R. H.; Baity, F. W.; Barber, G. C.; Carter, M. D.; ChangDiaz, F. R.; Pavarin, D.; Sparks, D. O.; Squire J. P.

    1999-01-01

    A helicon plasma source at Oak Ridge National Laboratory is being used to investigate operating scenarios relevant to the VASIMR (VAriable Specific Impulse Magnetoplasma Rocket). These include operation at high magnetic field (> = 0.4 T), high frequency (<= 30 MHz), high power (< = 3 kW), and with light ions (He+, H+). To date, He plasmas have been produced with n(sub e0) = 1.7 x 10(exp 19)/cu m (measured with an axially movable 4mm microwave interferometer), with Pin = I kW at f = 13.56 MHz and absolute value of B(sub 0) = 0.16 T. In the near future, diagnostics including a mass flow meter and a gridded energy analyzer array will be added to investigate fueling efficiency and the source power balance. The latest results, together with modeling results using the EMIR rf code, will be presented.

  10. Capillary Electrophoresis-Inductively Coupled Plasma Mass Spectrometry.

    PubMed

    Michalke, Bernhard

    2016-01-01

    During the recent years, capillary electrophoresis (CE) has been fully established as a powerful tool in separation sciences as well as in element speciation. This road of success is based on the rapid analysis time, low sample requirements, high separation efficiency, and low operating costs of CE. Inductively coupled plasma mass spectrometry (ICP-MS) is known for superior detection and multielement capability. Consequently, the combination of both instruments is approved for analysis of complex sample types at low element concentrations which require high detection power. Also the diversity of potential applications brings CE-ICP-MS coupling into central focus of element speciation. The key to successful combination of ICP-MS as an (multi-)element selective detector for CE is the availability of a suitable and effective interface.Therefore, this chapter summarizes the most important and basic principles about coupling of capillary electrophoresis to ICP-MS. Specifically, the major requirements for interfacing are described and technical solutions are given. Such solutions include the closing of the electrical circuit from CE at the nebulization, the adoption of flow rates for efficient nebulization, the reduction of a suction flow through the capillary, caused by the nebulizer, and maintaining the high separation resolution from CE across the interface for ICP-MS detection. Additionally, detailed information is presented to determine and quantify the siphoning suction through the CE capillary by the nebulizer. Finally, two applications, namely, the manganese and selenium speciation in cerebrospinal fluid are shown as examples, providing the relevant operational parameter. PMID:27645737

  11. Microwave Plasma Sources for Gas Processing

    SciTech Connect

    Mizeraczyk, J.; Jasinski, M.; Dors, M.; Zakrzewski, Z.

    2008-03-19

    In this paper atmospheric pressure microwave discharge methods and devices used for producing the non-thermal plasmas for processing of gases are presented. The main part of the paper concerns the microwave plasma sources (MPSs) for environmental protection applications. A few types of the MPSs, i.e. waveguide-based surface wave sustained MPS, coaxial-line-based and waveguide-based nozzle-type MPSs, waveguide-based nozzleless cylinder-type MPS and MPS for microdischarges are presented. Also, results of the laboratory experiments on the plasma processing of several highly-concentrated (up to several tens percent) volatile organic compounds (VOCs), including Freon-type refrigerants, in the moderate (200-400 W) waveguide-based nozzle-type MPS (2.45 GHz) are presented. The results showed that the microwave discharge plasma fully decomposed the VOCs at relatively low energy cost. The energy efficiency of VOCs decomposition reached 1000 g/kWh. This suggests that the microwave discharge plasma can be a useful tool for environmental protection applications. In this paper also results of the use of the waveguide-based nozzleless cylinder-type MPS to methane reforming into hydrogen are presented.

  12. Physics-electrical hybrid model for real time impedance matching and remote plasma characterization in RF plasma sources

    NASA Astrophysics Data System (ADS)

    Sudhir, Dass; Bandyopadhyay, M.; Chakraborty, A.

    2016-02-01

    Plasma characterization and impedance matching are an integral part of any radio frequency (RF) based plasma source. In long pulse operation, particularly in high power operation where plasma load may vary due to different reasons (e.g. pressure and power), online tuning of impedance matching circuit and remote plasma density estimation are very useful. In some cases, due to remote interfaces, radio activation and, due to maintenance issues, power probes are not allowed to be incorporated in the ion source design for plasma characterization. Therefore, for characterization and impedance matching, more remote schemes are envisaged. Two such schemes by the same authors are suggested in these regards, which are based on air core transformer model of inductive coupled plasma (ICP) [M. Bandyopadhyay et al., Nucl. Fusion 55, 033017 (2015); D. Sudhir et al., Rev. Sci. Instrum. 85, 013510 (2014)]. However, the influence of the RF field interaction with the plasma to determine its impedance, a physics code HELIC [D. Arnush, Phys. Plasmas 7, 3042 (2000)] is coupled with the transformer model. This model can be useful for both types of RF sources, i.e., ICP and helicon sources.

  13. Langmuir Probe and Mass Spectroscopic Measurements in Inductively Coupled CF4 Plasmas

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Sharma, Surendra; Cruden, B. A.; Meyyappan, M.

    2001-01-01

    Abstract Electron and ion energy distribution functions and other plasma parameters such as plasma potential (V(sub p)) , electron temperature (T(sub e)), and electron and ion number densities (n (sub e) and n(sub i)) in low pressure CF4 plasmas have been measured. The experiments were conducted in a GEC cell using an inductively coupled plasma (ICP) device powered by a 13.56 MHz radio-frequency (rf) power source. The measurements were made at 300 W of input rf power at 10, 30 and 50 mTorr gas pressures. Langmuir probe measurements suggest that n(sub e), n(sub i) and V(sub p) remain constant over 60% of the central electrode area, beyond which they decrease. Within the limits of experimental error (+/- 0.25 eV), T(sub e) remains nearly constant over the electrode area. T(sub e) and V(sub p) increase with a decrease in pressure. n(sub e) and n(sub i) are not affected as significantly as T(sub e) or V(sub p) by variation in the gas pressure. The electron energy distribution function (EEDF) measurements indicate a highly non-Maxwellian plasma. CF3+ is the most dominant ion product of the plasma, followed by CF2+ and CF+. The concentrations of CF2+ and CF+ are much larger than that is possible from direct electron impact ionization of the parent gas. The cross-section data suggest that the direct electron impact ionization of fragment neutrals and negative ion production by electron attachment may be responsible for increase of the minor ions.

  14. Negative hydrogen ion production in a helicon plasma source

    SciTech Connect

    Santoso, J. Corr, C. S.; Manoharan, R.; O'Byrne, S.

    2015-09-15

    In order to develop very high energy (>1 MeV) neutral beam injection systems for applications, such as plasma heating in fusion devices, it is necessary first to develop high throughput negative ion sources. For the ITER reference source, this will be realised using caesiated inductively coupled plasma devices, containing either hydrogen or deuterium discharges, operated with high rf input powers (up to 90 kW per driver). It has been suggested that due to their high power coupling efficiency, helicon devices may be able to reduce power requirements and potentially obviate the need for caesiation due to the high plasma densities achievable. Here, we present measurements of negative ion densities in a hydrogen discharge produced by a helicon device, with externally applied DC magnetic fields ranging from 0 to 8.5 mT at 5 and 10 mTorr fill pressures. These measurements were taken in the magnetised plasma interaction experiment at the Australian National University and were performed using the probe-based laser photodetachment technique, modified for the use in the afterglow of the plasma discharge. A peak in the electron density is observed at ∼3 mT and is correlated with changes in the rf power transfer efficiency. With increasing magnetic field, an increase in the negative ion fraction from 0.04 to 0.10 and negative ion densities from 8 × 10{sup 14 }m{sup −3} to 7 × 10{sup 15 }m{sup −3} is observed. It is also shown that the negative ion densities can be increased by a factor of 8 with the application of an external DC magnetic field.

  15. Fundamental properties of a planar type of inductively coupled thermal plasma with current modulation

    NASA Astrophysics Data System (ADS)

    Tial, Mai Kai Suan; Tanaka, Yasunori; Akao, Mika; Uesugi, Yoshihiko; Ishijima, Tatsuo

    2016-09-01

    A novel planar type of induction thermal plasma system with current modulation has been developed using a rectangular quartz vessel instead of a conventional cylindrical tube for thermal plasma processing for large-area material surface. To expand the generated thermal plasma laterally, the rectangular coil is used around the planar torch. Electrical properties including effective electrical impedance and instantaneous effective power of the thermal plasma at a pressure of 30 Torr at an input power about 10 kW were studied for the developed Ar planar type of induction thermal plasma. The spatial distribution of Ar excitation temperature in a planar torch was measured to elucidate fundamental aspects of a planar thermal plasma. Furthermore, the effect of coil current modulation was studied for changes in electrical properties and temperature, and their controllability in a planar thermal plasma.

  16. Serum/plasma methylmercury determination by isotope dilution gas chromatography-inductively coupled plasma mass spectrometry.

    PubMed

    Baxter, Douglas C; Faarinen, Mikko; Österlund, Heléne; Rodushkin, Ilia; Christensen, Morten

    2011-09-01

    A method for the determination of methylmercury in plasma and serum samples was developed. The method uses isotope dilution with (198)Hg-labeled methylmercury, extraction into dichloromethane, back-extraction into water, aqueous-phase ethylation, purge and trap collection, thermal desorption, separation by gas chromatography, and mercury isotope specific detection by inductively coupled plasma mass spectrometry. By spiking 2 mL sample with 1.2 ng tracer, measurements in a concentration interval of (0.007-2.9) μg L(-1) could be performed with uncertainty amplification factors <2. A limit of quantification of 0.03 μg L(-1) was estimated at 10 times the standard deviation of concentrations measured in preparation blanks. Within- and between-run relative standard deviations were <10% at added concentration levels of 0.14 μg L(-1), 0.35 μg L(-1) and 2.8 μg L(-1), with recoveries in the range 82-110%. Application of the method to 50 plasma/serum samples yielded a median (mean; range) concentration of methylmercury of 0.081 (0.091; <0.03-0.19) μg L(-1). This is the first time methylmercury has been directly measured in this kind of specimen, and is therefore the first estimate of a reference range.

  17. Non-invasive in situ plasma monitoring of reactive gases using the floating harmonic method for inductively coupled plasma etching application

    SciTech Connect

    Lee, J. H.; Kim, M. J.; Yoon, Y. S.

    2013-04-15

    The floating harmonic method was developed for in situ plasma diagnostics of allowing real time measurement of electron temperature (T{sub e}) and ion flux (J{sub ion}) without contamination of the probe from surface modification by reactive species. In this study, this novel non-invasive diagnostic system was studied to characterize inductively coupled plasma of reactive gases monitoring T{sub e} and J{sub ion} for investigating the optimum plasma etching conditions and controlling of the real-time plasma surface reaction in the range of 200-900 W source power, 10-100 W bias power, and 3-15 mTorr chamber pressure, respectively.

  18. Study of electron current extraction from a radio frequency plasma cathode designed as a neutralizer for ion source applications

    NASA Astrophysics Data System (ADS)

    Jahanbakhsh, Sina; Satir, Mert; Celik, Murat

    2016-02-01

    Plasma cathodes are insert free devices that are developed to be employed as electron sources in electric propulsion and ion source applications as practical alternatives to more commonly used hollow cathodes. Inductively coupled plasma cathodes, or Radio Frequency (RF) plasma cathodes, are introduced in recent years. Because of its compact geometry, and simple and efficient plasma generation, RF plasma source is considered to be suitable for plasma cathode applications. In this study, numerous RF plasma cathodes have been designed and manufactured. Experimental measurements have been conducted to study the effects of geometric and operational parameters. Experimental results of this study show that the plasma generation and electron extraction characteristics of the RF plasma cathode device strongly depend on the geometric parameters such as chamber diameter, chamber length, orifice diameter, orifice length, as well as the operational parameters such as RF power and gas mass flow rate.

  19. 21 CFR 640.74 - Modification of Source Plasma.

    Code of Federal Regulations, 2010 CFR

    2010-04-01

    ... 21 Food and Drugs 7 2010-04-01 2010-04-01 false Modification of Source Plasma. 640.74 Section 640...) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.74 Modification of Source Plasma. (a) Upon approval by the Director, Center for Biologics Evaluation and Research, Food...

  20. 21 CFR 640.74 - Modification of Source Plasma.

    Code of Federal Regulations, 2011 CFR

    2011-04-01

    ... 21 Food and Drugs 7 2011-04-01 2010-04-01 true Modification of Source Plasma. 640.74 Section 640...) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.74 Modification of Source Plasma. (a) Upon approval by the Director, Center for Biologics Evaluation and Research, Food...

  1. 21 CFR 640.74 - Modification of Source Plasma.

    Code of Federal Regulations, 2012 CFR

    2012-04-01

    ... 21 Food and Drugs 7 2012-04-01 2012-04-01 false Modification of Source Plasma. 640.74 Section 640...) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.74 Modification of Source Plasma. Link to an amendment published at 77 FR 18, Jan. 3, 2012. (a) Upon approval by...

  2. 21 CFR 640.74 - Modification of Source Plasma.

    Code of Federal Regulations, 2013 CFR

    2013-04-01

    ... 21 Food and Drugs 7 2013-04-01 2013-04-01 false Modification of Source Plasma. 640.74 Section 640...) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.74 Modification of Source Plasma. (a) Upon approval by the Director, Center for Biologics Evaluation and Research, Food...

  3. 21 CFR 640.74 - Modification of Source Plasma.

    Code of Federal Regulations, 2014 CFR

    2014-04-01

    ... 21 Food and Drugs 7 2014-04-01 2014-04-01 false Modification of Source Plasma. 640.74 Section 640...) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.74 Modification of Source Plasma. (a) Upon approval by the Director, Center for Biologics Evaluation and Research, Food...

  4. Collisionality scaling of turbulence and transport in advanced inductive plasmas in DIII-D

    NASA Astrophysics Data System (ADS)

    Yan, Z.; McKee, G. R.; Petty, C.; Luce, T.; Chen, X.; Holland, C.; Rhodes, T.; Schmitz, L.; Wang, G.; Zeng, L.; Marinoni, A.; Solomon, W.; DIII-D Team

    2015-11-01

    The collisionality scaling of multiscale turbulence properties and thermal transport characteristics in high-beta, high confinement Advanced Inductive (AI) plasmas was determined via systematic dimensionless scaling experiments on DIII-D. Preliminary estimate indicates a weak collisionality dependence of energy confinement as v* varied by a factor of ~2. Electron density and scaled (~Bt2) temperature profiles are well matched in the scan. Interestingly, low-k density fluctuation amplitudes are observed to decrease at lower v* near ρ ~ 0 . 75 . Ion and electron thermal transport values, computed with ONETWO using experimentally measured profiles and sources, will be presented, along with multi-scale turbulence measurements obtained with various fluctuation diagnostics. Altering collisionality should change the relative contribution of different modes to transport.

  5. Inductively Coupled Plasma: Fundamental Particle Investigations with Laser Ablation and Applications in Magnetic Sector Mass Spectrometry

    SciTech Connect

    Saetveit, Nathan Joe

    2008-01-01

    Particle size effects and elemental fractionation in laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) are investigated with nanosecond and femtosecond laser ablation, differential mobility analysis, and magnetic sector ICP-MS. Laser pulse width was found to have a significant influence on the LA particle size distribution and the elemental composition of the aerosol and thus fractionation. Emission from individual particles from solution nebulization, glass, and a pressed powder pellet are observed with high speed digital photography. The presence of intact particles in an ICP is shown to be a likely source of fractionation. A technique for the online detection of stimulated elemental release from neural tissue using magnetic sector ICP-MS is described. Detection limits of 1 μg L-1 or better were found for P, Mn, Fe, Cu, and Zn in a 60 μL injection in a physiological saline matrix.

  6. Growth of graphene-based films using afterglow of inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Hiramatsu, Mineo; Tomatsu, Masakazu; Kondo, Hiroki; Hori, Masaru

    2014-10-01

    Plasma-enhanced CVD (PECVD) employing methane/hydrogen gases has been used to grow diamond and carbon nanostructures. In the case of graphene growth using PECVD, excessive supply of carbon precursors and ion bombardment on the growing surface would cause secondary nuclei, resulting in small size of graphene grain and degradation in crystallinity. To overcome this issue, in this work, afterglow of inductively coupled plasma (ICP) was used for the growth of graphene. The CVD system is simple and consists of a reaction chamber and a remote radical source that uses an ICP in cylindrical geometry. Methane/hydrogen gases were fed through a quartz tube of 26 mm inner diameter and 20 cm in length. A five-turn rf (13.56 MHz) coil was mounted on the quartz tube. Substrates (Ni-coated Si and Cu foil) were located in the afterglow region of ICP. Growth experiments were carried out for 1-10 min at temperature of 700 C, rf power of 400 W, and total pressure of 100 mTorr. We have successfully fabricated graphene-based films, which was confirmed by the Raman spectrum and SEM image of deposit. We will discuss the planar graphene growth mechanism in terms of precursors and their surface reaction, in conjunction with the growth experiments using microwave plasma and ICP in planar geometry.

  7. Magnetic plasma confinement for laser ion source.

    PubMed

    Okamura, M; Adeyemi, A; Kanesue, T; Tamura, J; Kondo, K; Dabrowski, R

    2010-02-01

    A laser ion source (LIS) can easily provide a high current beam. However, it has been difficult to obtain a longer beam pulse while keeping a high current. On occasion, longer beam pulses are required by certain applications. For example, more than 10 micros of beam pulse is required for injecting highly charged beams to a large sized synchrotron. To extend beam pulse width, a solenoid field was applied at the drift space of the LIS at Brookhaven National Laboratory. The solenoid field suppressed the diverging angle of the expanding plasma and the beam pulse was widened. Also, it was observed that the plasma state was conserved after passing through a few hundred gauss of the 480 mm length solenoid field.

  8. Atlas of Atomic Spectral Lines of Neptunium Emitted by Inductively Coupled Plasma

    SciTech Connect

    DeKalb, E.L. and Edelson, M. C.

    1987-08-01

    Optical emission spectra from high-purity Np-237 were generated with a glovebox-enclosed inductively coupled plasma (ICP) source. Spectra covering the 230-700 nm wavelength range are presented along with general commentary on the methodology used in collecting the data. The Ames Laboratory Nuclear Safeguards and Security Program has been charged with the task of developing optical spectroscopic methods to analyze the composition of spent nuclear fuels. Such materials are highly radioactive even after prolonged 'cooling' and are chemically complex. Neptunium (Np) is a highly toxic by-product of nuclear power generation and is found, in low abundance, in spent nuclear fuels. This atlas of the optical emission spectrum of Np, as produced by an inductively coupled plasma (ICP) spectroscopic source, is part of a general survey of the ICP emission spectra of the actinide elements. The ICP emission spectrum of the actinides originates almost exclusively from the electronic relaxation of excited, singly ionized species. Spectral data on the Np ion emission spectrum (i.e., the Np II spectrum) have been reported by Tomkins and Fred [1] and Haaland [2]. Tomkins and Fred excited the Np II spectrum with a Cu spark discharge and identified 114 Np lines in the 265.5 - 436.3 nm spectral range. Haaland, who corrected some spectral line misidentifications in the work of Tomkins and Fred, utilized an enclosed Au spark discharge to excite the Np II spectrum and reported 203 Np lines within the 265.4 - 461.0 nm wavelength range.

  9. Thrust Stand Measurements Using Alternative Propellants in the Microwave Assisted Discharge Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.

    2011-01-01

    Storable propellants (for example water, ammonia, and hydrazine) are attractive for deep space propulsion due to their naturally high density at ambient interplanetary conditions, which obviates the need for a cryogenic/venting system. Water in particular is attractive due to its ease of handling and availability both terrestrially and extra-terrestrially. While many storable propellants are reactive and corrosive, a propulsion scheme where the propellant is insulated from vulnerable (e.g. metallic) sections of the assembly would be well-suited to process these otherwise incompatible propellants. Pulsed inductive plasma thrusters meet this criterion because they can be operated without direct propellant-electrode interaction. During operation of these devices, electrical energy is capacitively stored and then discharged through an inductive coil creating a time-varying current in the coil that interacts with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, many pulsed inductive plasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Discharge Inductive Plasma Accelerator (MAD-IPA) is a pulsed inductive plasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil before the main current pulse via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and a static magnetic field from a set of permanent magnets arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the theta

  10. Low-temperature atmospheric-pressure plasma sources for plasma medicine.

    PubMed

    Setsuhara, Yuichi

    2016-09-01

    In this review paper, fundamental overviews of low-temperature atmospheric-pressure plasma generation are provided and various sources for plasma medicine are described in terms of operating conditions and plasma properties. PMID:27109191

  11. Low-temperature atmospheric-pressure plasma sources for plasma medicine.

    PubMed

    Setsuhara, Yuichi

    2016-09-01

    In this review paper, fundamental overviews of low-temperature atmospheric-pressure plasma generation are provided and various sources for plasma medicine are described in terms of operating conditions and plasma properties.

  12. Fundamental studies of the plasma extraction and ion beam formation processes in inductively coupled plasma mass spectrometry

    SciTech Connect

    Niu, Hongsen

    1995-02-10

    The fundamental and practical aspects are described for extracting ions from atmospheric pressure plasma sources into an analytical mass spectrometer. Methodologies and basic concepts of inductively coupled plasma mass spectrometry (ICP-MS) are emphasized in the discussion, including ion source, sampling interface, supersonic expansion, slumming process, ion optics and beam focusing, and vacuum considerations. Some new developments and innovative designs are introduced. The plasma extraction process in ICP-MS was investigated by Langmuir measurements in the region between the skimmer and first ion lens. Electron temperature (T{sub e}) is in the range 2000--11000 K and changes with probe position inside an aerosol gas flow. Electron density (n{sub e}) is in the range 10{sup 8}--10{sup 10} {sup {minus}cm }at the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} near the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} downstream further behind the skimmer. Electron density in the beam leaving the skimmer also depends on water loading and on the presence and mass of matrix elements. Axially resolved distributions of electron number-density and electron temperature were obtained to characterize the ion beam at a variety of plasma operating conditions. The electron density dropped by a factor of 101 along the centerline between the sampler and skimmer cones in the first stage and continued to drop by factors of 10{sup 4}--10{sup 5} downstream of skimmer to the entrance of ion lens. The electron density in the beam expansion behind sampler cone exhibited a 1/z{sup 2} intensity fall-off (z is the axial position). An second beam expansion originated from the skimmer entrance, and the beam flow underwent with another 1/z{sup 2} fall-off behind the skimmer. Skimmer interactions play an important role in plasma extraction in the ICP-MS instrument.

  13. Features of semiplanotron surface plasma sources

    SciTech Connect

    Dudnikov, Vadim

    2012-02-15

    Features of the semiplanotron surface plasma sources (SPS) with cesiation used for high efficient negative ion beam production from first development to modern condition are considered. Design features of semiplanotrons SPS with cylindrical and spherical geometric focusing and the features of the negative ion production in the semiplanotrons are reviewed. Several versions of semiplanotrons with efficiency up to 0.1 A of H{sup -} per kW of discharge power are discussed. Modifications of the semiplanotrons for dc operation and for heavy negative ion production are reviewed.

  14. The PERC{trademark} process: Existing and potential applications for induction coupled plasma technology in hazardous and radioactive waste treatment

    SciTech Connect

    Blutke, A.S.; Vavruska, J.S.; Serino, J.F.

    1996-12-31

    Plasma Technology, Inc. (PTI), a Santa Fe, New Mexico corporation has developed the Plasma Energy Recycle and Conversion (PERC){trademark} treatment process as a safe and environmentally clean alternative to conventional thermal destruction technologies. The PERC{trademark} treatment process uses as its heat source an advanced Induction Coupled Plasma (ICP) torch connected to a reaction chamber system with an additional emission control system. For example, organic-based gas, liquid, slurry, and/or solid waste streams can be converted into usable or even salable products while residual emissions are reduced to an absolute minimum. In applications for treatment of hazardous and radioactive waste streams, the PERC system could be used for destruction of the hazardous organic constituents and/or significant waste volume reduction while capturing the radioactive fraction in a non-leachable form. Like Direct Current (DC) and Alternating Current (AC) arc plasma systems, ICP torches offer sufficient energy to decompose, melt and/or vitrify any waste stream. The decision for an arc plasma or an IC plasma system has to be made on a case by case evaluation and is highly dependent on the specific waste stream`s form and composition. Induction coupled plasma technology offers one simple, but significant difference compared to DC or AC arc plasma systems: the ICP torch is electrodeless. To date, enormous research effort has been spent to improve the lifetime of electrodes and the effectiveness of related cooling systems. Arc plasma systems are established in research laboratories worldwide and are approaching a broad use in commercial applications. ICP technology has been improved relatively recently, but nowadays offers complete new and beneficial approaches in the field of waste conversion and treatment.

  15. Conical slow wave antenna as a plasma source.

    PubMed

    Grubb, D P; Lovell, T

    1978-01-01

    A simple conical helix has been successfully employed as a slow wave structure to generate plasmas by electron cyclotron resonance heating (ECRH). The plasma is typical of plasmas created by ''Lisitano coil'' sources, n approximately 10(10)-10(12) cm(-3) with T(e) approximately 2-20 eV. This source, however, is much simpler to fabricate. The ease of fabrication allows the user some flexibility in designing the source to fit a specific plasma physics experiment.

  16. Local cooling, plasma reheating and thermal pinching induced by single aerosol droplets injected into an inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Chan, George C.-Y.; Hieftje, Gary M.

    2016-07-01

    The injection of a single micrometer-sized droplet into an analytical inductively coupled plasma (ICP) perturbs the plasma and involves three sequential effects: local cooling, thermal pinching and plasma reheating. Time-resolved two-dimensional monochromatic imaging of the load-coil region of an ICP was used to monitor this sequence of plasma perturbations. When a microdroplet enters the plasma, it acts as a local heat sink and cools the nearby plasma region. The cooling effect is considered local, although the cooling volume can be large and extends 6 mm from the physical location of the vaporizing droplet. The liberated hydrogen, from decomposition of water, causes a thermal pinch effect by increasing the thermal conductivity of the bulk plasma and accelerating heat loss at the plasma periphery. As a response to the heat loss, the plasma shrinks in size, which increases its power density. Plasma shrinkage starts around the same time when the microdroplet enters the plasma and lasts at least 2 ms after the droplet leaves the load-coil region. Once the vaporizing droplet passes through a particular plasma volume, that volume is reheated to an even higher temperature than under steady-state conditions. Because of the opposing effects of plasma cooling and reheating, the plasma conditions are different upstream (downward) and downstream (upward) from a vaporizing droplet - cooling dominates the downstream region whereas reheating controls in the upstream domain. The boundary between the local cooling and reheating zones is sharp and is only ~ 1 mm thick. The reheating effect persists a relatively long time in the plasma, at least up to 4 ms after the droplet moves out of the load-coil region. The restoration of plasma equilibrium after the perturbation induced by microdroplet injection is slow. Microdroplet injection also induces a momentary change in plasma impedance, and the impedance change was found to correlate qualitatively with the different stages of plasma

  17. Plasma Sheet Source and Loss Processes

    NASA Technical Reports Server (NTRS)

    Lennartsson, O. W.

    2000-01-01

    Data from the TIMAS ion mass spectrometer on the Polar satellite, covering 15 ev/e to 33 keV/e in energy and essentially 4(pi) in view angles, are used to investigate the properties of earthward (sunward) field-aligned flows of ions, especially protons, in the plasma sheet-lobe transition region near local midnight. A total of 142 crossings of this region are analyzed at 12-sec time resolution, all in the northern hemisphere, at R(SM) approx. 4 - 7 R(sub E), and most (106) in the poleward (sunward) direction. Earthward proton flows are prominent in this transition region (greater than 50% of the time), typically appearing as sudden "blasts" with the most energetic protons (approx. 33 keV) arriving first with weak flux, followed by protons of decreasing energy and increasing flux until either: (1) a new "blast" appears, (2) the flux ends at a sharp boundary, or (3) the flux fades away within a few minutes as the mean energy drops to a few keV. Frequent step-like changes (less than 12 sec) of the flux suggest that perpendicular gradients on the scale of proton gyroradii are common. Peak flux is similar to central plasma sheet proton flux (10(exp 5) - 10(exp 6)/[cq cm sr sec keV/e] and usually occurs at E approx. 4 - 12 keV. Only the initial phase of each "blast" (approx. 1 min) displays pronounced field-alignment of the proton velocity distribution, consistent with the time-of-flight separation of a more or less isotropic source distribution with df/d(nu) less than 0. The dispersive signatures are often consistent with a source at R(SM) less than or equal to 30 R(sub E). No systematic latitudinal velocity dispersion is found, implying that the equatorial plasma source is itself convecting. In short, the proton "blasts" appear as sudden local expansions of central plasma sheet particles along reconfigured ("dipolarized") magnetic field lines.

  18. A double-plasma source of continuous bipolar ion-ion beam

    SciTech Connect

    Dudin, S. V.; Rafalskyi, D. V.

    2013-01-21

    A double-plasma source capable of the generation of a continuous bipolar ion-ion beam is described. The quasi-neutral ion-ion flow to an extraction electrode is formed in the system containing primary inductively coupled plasma separated from a secondary plasma by an electrostatic grid-type filter. The total current of each ion species to the 250 mm diameter extraction electrode is about 80 mA; the electron current does not exceed 30% of the ion current. Method of positive/negative ion current ratio control is proposed, allowing the ion currents ratio variation in wide range.

  19. Performance Effects of Adding a Parallel Capacitor to a Pulse Inductive Plasma Accelerator Powertrain

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.; Sivak, Amy D.; Balla, Joseph V.

    2011-01-01

    Pulsed inductive plasma accelerators are electrodeless space propulsion devices where a capacitor is charged to an initial voltage and then discharged through a coil as a high-current pulse that inductively couples energy into the propellant. The field produced by this pulse ionizes the propellant, producing a plasma near the face of the coil. Once a plasma is formed if can be accelerated and expelled at a high exhaust velocity by the Lorentz force arising from the interaction of an induced plasma current and the magnetic field. While there are many coil geometries that can be employed to inductively accelerate a plasma, in this paper the discussion is limit to planar geometries where the coil take the shape of a flat spiral. A recent review of the developmental history of planar-geometry pulsed inductive thrusters can be found in Ref. [1]. Two concepts that have employed this geometry are the Pulsed Inductive Thruster (PIT) and the Faraday Accelerator with Radio-frequency Assisted Discharge (FARAD).

  20. Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas

    SciTech Connect

    Brihoum, Melisa; Cunge, Gilles; Darnon, Maxime; Joubert, Olivier; Gahan, David; Braithwaite, Nicholas St. J.

    2013-03-15

    Changes in the ion flux and the time-averaged ion distribution functions are reported for pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For helium and argon plasmas, the ion flux increases rapidly after the start of the RF pulse and after about 50 {mu}s reaches the same steady state value as that in continuous ICPs. Therefore, when the plasma is pulsed at 1 kHz, the ion flux during the pulse has a value that is almost independent of the duty cycle. By contrast, in molecular electronegative chlorine/chlorosilane plasmas, the ion flux during the pulse reaches a steady state value that depends strongly on the duty cycle. This is because both the plasma chemistry and the electronegativity depend on the duty cycle. As a result, the ion flux is 15 times smaller in a pulsed 10% duty cycle plasma than in the continuous wave (CW) plasma. The consequence is that for a given synchronous RF biasing of a wafer-chuck, the ion energy is much higher in the pulsed plasma than it is in the CW plasma of chlorine/chlorosilane. Under these conditions, the wafer is bombarded by a low flux of very energetic ions, very much as it would in a low density, capacitively coupled plasma. Therefore, one can extend the operating range of ICPs through synchronous pulsing of the inductive excitation and capacitive chuck-bias, offering new means by which to control plasma etching.

  1. Modeling of inductively coupled plasma SF{sub 6}/O{sub 2}/Ar plasma discharge: Effect of O{sub 2} on the plasma kinetic properties

    SciTech Connect

    Pateau, Amand; Rhallabi, Ahmed Fernandez, Marie-Claude; Boufnichel, Mohamed; Roqueta, Fabrice

    2014-03-15

    A global model has been developed for low-pressure, inductively coupled plasma (ICP) SF{sub 6}/O{sub 2}/Ar mixtures. This model is based on a set of mass balance equations for all the considered species, coupled with the discharge power balance equation and the charge neutrality condition. The present study is an extension of the kinetic global model previously developed for SF{sub 6}/Ar ICP plasma discharges [Lallement et al., Plasma Sources Sci. Technol. 18, 025001 (2009)]. It is focused on the study of the impact of the O{sub 2} addition to the SF{sub 6}/Ar gas mixture on the plasma kinetic properties. The simulation results show that the electron density increases with the %O{sub 2}, which is due to the decrease of the plasma electronegativity, while the electron temperature is almost constant in our pressure range. The density evolutions of atomic fluorine and oxygen versus %O{sub 2} have been analyzed. Those atomic radicals play an important role in the silicon etching process. The atomic fluorine density increases from 0 up to 40% O{sub 2} where it reaches a maximum. This is due to the enhancement of the SF{sub 6} dissociation processes and the production of fluorine through the reactions between SF{sub x} and O. This trend is experimentally confirmed. On the other hand, the simulation results show that O(3p) is the preponderant atomic oxygen. Its density increases with %O{sub 2} until reaching a maximum at almost 40% O{sub 2}. Over this value, its diminution with O{sub 2}% can be justified by the high increase in the loss frequency of O(3p) by electronic impact in comparison to its production frequency by electronic impact with O{sub 2}.

  2. Experimental investigation on plasma parameter profiles on a wafer level with reactor gap lengths in an inductively coupled plasma

    SciTech Connect

    Kim, Ju-Ho; Chung, Chin-Wook; Kim, Young-Cheol

    2015-07-15

    The gap length effect on plasma parameters is investigated in a planar type inductively coupled plasma at various conditions. The spatial profiles of ion densities and the electron temperatures on the wafer level are measured with a 2D probe array based on the floating harmonic method. At low pressures, the spatial profiles of the plasma parameters rarely changed by various gap lengths, which indicates that nonlocal kinetics are dominant at low pressures. However, at relatively high pressures, the spatial profiles of the plasma parameter changed dramatically. These plasma distribution profile characteristics should be considered for plasma reactor design and processing setup, and can be explained by the diffusion of charged particles and the local kinetics.

  3. Characterization of inductively coupled Ar and Ar/CH4 plasma using tuned single Langmuir probe and fluid simulation

    NASA Astrophysics Data System (ADS)

    Cha, Ju-Hong; Han, Moon-Ki; Seo, Kwon-Sang; Kim, Dong-Hyun; Lee, Hae June; Lee, Ho-Jun

    2015-09-01

    An inductively coupled plasma source driven by 13.56 MHz was prepared for the deposition of a-C:H and hydro-fluorocarbon thin film. Properties of the plasma source are investigated by fluid simulation including Navier-Stokes equations and home-made tuned single Langmuir probe. Signal attenuation ratios of the Langmuir probe at first and second harmonic frequency were 49dB and 46dB respectively. Dependencies of plasma parameters on process parameters were well agreed with simulation results. It was found that gas flow field significantly affect spatial distribution of electron density and temperature even in inert gas feeding case. Higher electron density and lower temperature was observed near the gas inlet area. Ar/CH4 plasma simulation results shown that hydrocarbon radical densities have their lowest value at the vicinity of gas feeding line due to high flow velocity. For input power density of 0.07 W/cm3 , CH radical density follows electron density distribution. On the other hand, central region of the chamber become deficient in CH3 radical due to high dissociation rate accompanied with high electron density. The result suggest that optimization of discharge power is important for controlling deposition film quality in high density plasma sources.

  4. Dense Plasma Focus - From Alternative Fusion Source to Versatile High Energy Density Plasma Source for Plasma Nanotechnology

    NASA Astrophysics Data System (ADS)

    Rawat, R. S.

    2015-03-01

    The dense plasma focus (DPF), a coaxial plasma gun, utilizes pulsed high current electrical discharge to heat and compress the plasma to very high density and temperature with energy densities in the range of 1-10 × 1010 J/m3. The DPF device has always been in the company of several alternative magnetic fusion devices as it produces intense fusion neutrons. Several experiments conducted on many different DPF devices ranging over several order of storage energy have demonstrated that at higher storage energy the neutron production does not follow I4 scaling laws and deteriorate significantly raising concern about the device's capability and relevance for fusion energy. On the other hand, the high energy density pinch plasma in DPF device makes it a multiple radiation source of ions, electron, soft and hard x-rays, and neutrons, making it useful for several applications in many different fields such as lithography, radiography, imaging, activation analysis, radioisotopes production etc. Being a source of hot dense plasma, strong shockwave, intense energetic beams and radiation, etc, the DPF device, additionally, shows tremendous potential for applications in plasma nanoscience and plasma nanotechnology. In the present paper, the key features of plasma focus device are critically discussed to understand the novelties and opportunities that this device offers in processing and synthesis of nanophase materials using, both, the top-down and bottom-up approach. The results of recent key experimental investigations performed on (i) the processing and modification of bulk target substrates for phase change, surface reconstruction and nanostructurization, (ii) the nanostructurization of PLD grown magnetic thin films, and (iii) direct synthesis of nanostructured (nanowire, nanosheets and nanoflowers) materials using anode target material ablation, ablated plasma and background reactive gas based synthesis and purely gas phase synthesis of various different types of

  5. Surface modification of polypropylene separators in lithium-ion batteries using inductively coupled plasma treatment.

    PubMed

    Son, Jinyoung; Kim, Min-Sik; Lee, Hyun Woo; Yu, Jong-Sung; Kwon, Kwang-Ho

    2014-12-01

    We describe herein an improvement in the surface wettability of plasma-treated separators for use in lithium-ion batteries. We treated the separators with an O2/Ar inductively coupled plasma to increase their surface energy. The plasma treatment on the separator and plasma diagnostic experiments were performed in an inductively coupled plasma (ICP) reactor. The fraction of Ar in the O2/Ar plasma was changed from 0% to 100%. The plasma diagnostics were performed using optical emission spectroscopy and a double Langmuir probe. To confirm the morphological change of the separator membrane by the plasma treatment, we used the scanning electron microscopy. The surface energy measurements were performed using the drop method. We found that the plasma treatment transformed the separator from a hydrophobic membrane to a hydrophilic one, thereby achieving high separator wettability. After the treatment of the separators with O2/Ar plasma, the batteries exhibited better cycle performance and rate capacity than those employing the untreated ones. PMID:25971067

  6. Nonlinear kinetic effects in inductively coupled plasmas via particle-in-cell simulations

    NASA Astrophysics Data System (ADS)

    Froese, Aaron; Smolyakov, Andrei; Sydorenko, Dmytro

    2007-11-01

    Kinetic effects in inductively coupled plasmas due to thermal motion of particles modified by self-consistent magnetic fields are studied using a particle-in-cell code. In the low pressure, low frequency regime, electron mean free paths are large relative to device size and the trajectories are strongly curved by the induced rf magnetic field. Analytic linear theories are unable to recover effects accumulated along each nonlinear path. Therefore, the simulated ICP is made progressively more complex to find the source of observed plasma behaviours. With only thermal motion modifying the wave-particle interaction, nonlocal behaviour becomes dominant at low frequencies, causing an anomalous skin effect with increased skin depth and power absorption and decreased ponderomotive force. However, when influenced by magnetic fields, the nonlocal effects are suppressed at large wave amplitudes due to nonlinear trapping. A mechanism is proposed for this low frequency restoration of local behaviour. Finally, a low rate of electron-neutral collisions is found to counteract the nonlinear behaviour, and hence reinforces nonlocal behaviour.

  7. Numerical Investigation of Flow Fields in Inductively Coupled Plasma Wind Tunnels

    NASA Astrophysics Data System (ADS)

    Yu, Minghao; Yusuke, Takahashi; Hisashi, Kihara; Ken-ichi, Abe; Kazuhiko, Yamada; Takashi, Abe

    2014-10-01

    Numerical simulations of 10 kW and 110 kW inductively coupled plasma (ICP) wind tunnels were carried out to study physical properties of the flow inside the ICP torch and vacuum chamber with air as the working gas. Two-dimensional compressible axisymmetric Navier-Stokes (N-S) equations that took into account 11 species and 49 chemical reactions of air, were solved. A heat source model was used to describe the heating phenomenon instead of solving the electromagnetic equations. In the vacuum chamber, a four-temperature model was coupled with N-S equations. Numerical results for the 10 kW ICP wind tunnel are presented and discussed in detail as a representative case. It was found that the plasma flow in the vacuum chamber tended to be in local thermochemical equilibrium. To study the influence of operation conditions on the flow field, simulations were carried out for different chamber pressures and/or input powers. The computational results for the above two ICP wind tunnels were compared with corresponding experimental data. The computational and experimental results agree well, therefore the flow fields of ICP wind tunnels can be clearly understood.

  8. Effect of a Second, Parallel Capacitor on the Performance of a Pulse Inductive Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.; Balla, Joseph V.

    2010-01-01

    Pulsed inductive plasma accelerators are electrodeless space propulsion devices where a capacitor is charged to an initial voltage and is then discharged through an inductive coil that couples energy into the propellant, ionizing and accelerating it to produce thrust. A model that employs a set of circuit equations (as illustrated in Fig. 1a) coupled to a one-dimensional momentum equation has been previously used by Lovberg and Dailey [1] and Polzin et al. [2-4] to model the plasma acceleration process in pulsed inductive thrusters. In this paper an extra capacitor, inductor, and resistor are added to the system in the manner illustrated in the schematic shown in Fig. 1b. If the second capacitor has a smaller value than the initially charged capacitor, it can serve to increase the current rise rate through the inductive coil. Increasing the current rise rate should serve to better ionize the propellant. The equation of motion is solved to find the effect of an increased current rise rate on the acceleration process. We examine the tradeoffs between enhancing the breakdown process (increasing current rise rate) and altering the plasma acceleration process. These results provide insight into the performance of modified circuits in an inductive thruster, revealing how this design permutation can affect an inductive thruster's performance.

  9. A comprehensive study of different gases in inductively coupled plasma torch operating at one atmosphere

    SciTech Connect

    Punjabi, Sangeeta B.; Joshi, N. K.; Mangalvedekar, H. A.; Lande, B. K.; Das, A. K.; Kothari, D. C.

    2012-01-15

    A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.

  10. Application of poloidal beta and plasma internal inductance in determination of input power time of Damavand tokamak

    NASA Astrophysics Data System (ADS)

    Noori, Ehsanallah; Sadeghi, Yahya; Ghoranneviss, Mahmood

    2016-10-01

    In this study, magnetic measurement of poloidal fields were used to determine poloidal beta and plasma internal inductance of Damavand tokamak combination of poloidal beta and plasma internal inductance (β _p+{l_i}/{2} ), known as Shafranov parameter, was obtained experimentally in terms of normal and tangential components of the magnetic field. Plasma internal inductance and poloidal beta were obtained using parametrization method based on analytical solution of Grad-Shafranov equation (GSE) and compared with parabolic-like profile of toroidal current density approach for determination of the plasma internal inductance. Finding evolution of β _p+{l_i}/{2} and plasma internal inductance. Finding poloidal beta (Shafranov parameter and internal inductance) and using energy balance equation, thermal energy and energy confinement were determined qualitatively in terms of poloidal beta during a regular discharge of Damavand tokamak.

  11. Chromium plating pollution source reduction by plasma source ion implantation

    SciTech Connect

    Chen, A.; Sridharan, K.; Dodd, R.A.; Conrad, J.R.; Qiu, X.; Hamdi, A.H.; Elmoursi, A.A.; Malaczynski, G.W.; Horne, W.G.

    1995-12-31

    There is growing concern over the environmental toxicity and workers` health issues due to the chemical baths and rinse water used in the hard chromium plating process. In this regard the significant hardening response of chromium to nitrogen ion implantation can be environmentally beneficial from the standpoint of decreasing the thickness and the frequency of application of chromium plating. In this paper the results of a study of nitrogen ion implantation of chrome plated test flats using the non-line-of-sight Plasma Source Ion Implantation (PSII) process, are discussed. Surface characterization was performed using Scanning Electron Microscopy (SEM), Auger Electron Spectroscopy (AES), and Electron Spectroscopy for Chemical Analysis (ESCA). The surface properties were evaluated using a microhardness tester, a pin-on-disk wear tester, and a corrosion measurement system. Industrial field testing of nitrogen PSII treated chromium plated parts showed an improvement by a factor of two compared to the unimplanted case.

  12. The development of space plasma testing facility using RF source

    NASA Astrophysics Data System (ADS)

    Kamieneski, Richard; Hyde, Alexander; Batishchev, Oleg

    2012-10-01

    A new testing facility is being developed to simulate space and atmospheric plasmas. It utilizes modified helicon plasma source [1] to ionize gases common to space and ionosphere, namely hydrogen, helium, and nitrogen. Emission spectra of ionized gases are analyzed by vacuum spectrometer to understand plasma composition. The design of computerized controls and data acquisition system are discussed. [4pt] [1] O. Batishchev, Minihelicon Plasma Thruster, IEEE Trans. Plasma Science, 37 (8) 1563, 2009.

  13. 3-Dimensional Modeling of Capacitively and Inductively Coupled Plasma Etching Systems

    NASA Astrophysics Data System (ADS)

    Rauf, Shahid

    2008-10-01

    Low temperature plasmas are widely used for thin film etching during micro and nano-electronic device fabrication. Fluid and hybrid plasma models were developed 15-20 years ago to understand the fundamentals of these plasmas and plasma etching. These models have significantly evolved since then, and are now a major tool used for new plasma hardware design and problem resolution. Plasma etching is a complex physical phenomenon, where inter-coupled plasma, electromagnetic, fluid dynamics, and thermal effects all have a major influence. The next frontier in the evolution of fluid-based plasma models is where these models are able to self-consistently treat the inter-coupling of plasma physics with fluid dynamics, electromagnetics, heat transfer and magnetostatics. We describe one such model in this paper and illustrate its use in solving engineering problems of interest for next generation plasma etcher design. Our 3-dimensional plasma model includes the full set of Maxwell equations, transport equations for all charged and neutral species in the plasma, the Navier-Stokes equation for fluid flow, and Kirchhoff's equations for the lumped external circuit. This model also includes Monte Carlo based kinetic models for secondary electrons and stochastic heating, and can take account of plasma chemistry. This modeling formalism allows us to self-consistently treat the dynamics in commercial inductively and capacitively coupled plasma etching reactors with realistic plasma chemistries, magnetic fields, and reactor geometries. We are also able to investigate the influence of the distributed electromagnetic circuit at very high frequencies (VHF) on the plasma dynamics. The model is used to assess the impact of azimuthal asymmetries in plasma reactor design (e.g., off-center pump, 3D magnetic field, slit valve, flow restrictor) on plasma characteristics at frequencies from 2 -- 180 MHz. With Jason Kenney, Ankur Agarwal, Ajit Balakrishna, Kallol Bera, and Ken Collins.

  14. Gas-discharge plasma sources for nonlocal plasma technology

    SciTech Connect

    Demidov, V. I.; DeJoseph, C. A. Jr.; Simonov, V. Ya.

    2007-11-12

    Nonlocal plasma technology is based on the effect of self-trapping of fast electrons in the plasma volume [V. I. Demidov, C. A. DeJoseph, Jr., and A. A. Kudryavtsev, Phys. Rev. Lett. 95, 215002 (2006)]. This effect can be achieved by changing the ratio of fast electron flux to ion flux incident on the plasma boundaries. This in turn leads to a significant change in plasma properties and therefore can be useful for technological applications. A gas-discharge device which demonstrates control of the plasma properties by this method is described.

  15. Synthesis of carbon onionlike nanostructures from methane in plasma flow of induction plasmatron

    NASA Astrophysics Data System (ADS)

    Anchukov, K. E.; Zalogin, G. N.; Krasil'nikov, A. V.; Popov, M. Yu.; Kul'nitskii, B. A.

    2015-11-01

    The results of synthesis of carbon onionlike nanostructures from methane in plasma flow of inert gas (argon) generated in induction high-frequency plasmatron are considered and discussed. Carbon vapor obtained via dissociation of methane in plasma flow was condensed on copper substrates placed in a working chamber of the setup. The content of the synthesized soot was analyzed using scanning and transmission electron microscopy. As a result of the performed experiments, carbon onionlike structures with 20- to 100-nm sizes were obtained.

  16. Impact of Stationary Direct Current in the Central Solenoidal Coil on Tokamak Plasma Formation by Non-induction Heating

    NASA Astrophysics Data System (ADS)

    Watanabe, Osamu

    2016-09-01

    Stationary direct current in the central solenoidal coil (DCCS) of tokamak devices can reduce the non-induction heating energy necessary for tokamak plasma formation. The magnetic field energy in the inner region of the central solenoidal coil (CS region) is expelled during the tokamak plasma formation, because the vertical magnetic field intensity generated by the central solenoidal coil and poloidal field coils is partly cancelled by the increase in the toroidal plasma current. Because this magnetic field energy expelled from the CS region is distributed to the tokamak plasma in accordance with the mutual inductance, this expelled energy can drive the toroidal plasma current inductively. This energy expulsion in the CS region can be enhanced by the DCCS without the modification of the tokamak plasma configuration, when the CS coil current has negligible leakage magnetic field in the plasma area. Because the drive of the toroidal plasma current by non-induction heating can be assisted by this inductive current drive mechanism, the non-induction heating energy necessary for the tokamak plasma formation can be reduced by the DCCS. If the non-induction heating is constant, the tokamak plasma formation time can be shorted by the DCCS.

  17. Energetic electron avalanches and mode transitions in planar inductively coupled radio-frequency driven plasmas operated in oxygen

    SciTech Connect

    Zaka-ul-Islam, M.; Niemi, K.; Gans, T.; O'Connell, D.

    2011-07-25

    Space and phase resolved optical emission spectroscopic measurements reveal that in certain parameter regimes, inductively coupled radio-frequency driven plasmas exhibit three distinct operation modes. At low powers, the plasma operates as an alpha-mode capacitively coupled plasma driven through the dynamics of the plasma boundary sheath potential in front of the antenna. At high powers, the plasma operates in inductive mode sustained through induced electric fields due to the time varying currents and associated magnetic fields from the antenna. At intermediate powers, close to the often observed capacitive to inductive (E-H) transition regime, energetic electron avalanches are identified to play a significant role in plasma sustainment, similar to gamma-mode capacitively coupled plasmas. These energetic electrons traverse the whole plasma gap, potentially influencing plasma surface interactions as exploited in technological applications.

  18. Inductively coupled plasma-atomic emission spectroscopy: a computer controlled, scanning monochromator system for the rapid determination of the elements

    SciTech Connect

    Floyd, M.A.

    1980-03-01

    A computer controlled, scanning monochromator system specifically designed for the rapid, sequential determination of the elements is described. The monochromator is combined with an inductively coupled plasma excitation source so that elements at major, minor, trace, and ultratrace levels may be determined, in sequence, without changing experimental parameters other than the spectral line observed. A number of distinctive features not found in previously described versions are incorporated into the system here described. Performance characteristics of the entire system and several analytical applications are discussed.

  19. A hybrid model of radio frequency biased inductively coupled plasma discharges: description of model and experimental validation in argon

    NASA Astrophysics Data System (ADS)

    Wen, De-Qi; Liu, Wei; Gao, Fei; Lieberman, M. A.; Wang, You-Nian

    2016-08-01

    A hybrid model, i.e. a global model coupled bidirectionally with a parallel Monte-Carlo collision (MCC) sheath model, is developed to investigate an inductively coupled discharge with a bias source. This hybrid model can self-consistently reveal the interaction between the bulk plasma and the radio frequency (rf) bias sheath. More specifically, the plasma parameters affecting characteristics of rf bias sheath (sheath length and self-bias) are calculated by a global model and the effect of the rf bias sheath on the bulk plasma is determined by the voltage drop of the rf bias sheath. Moreover, specific numbers of ions are tracked in the rf bias sheath and ultimately the ion energy distribution function (IEDF) incident on the bias electrode is obtained. To validate this model, both bulk plasma density and IEDF on the bias electrode in an argon discharge are compared with experimental measurements, and a good agreement is obtained. The advantage of this model is that it can quickly calculate the bulk plasma density and IEDF on the bias electrode, which are of practical interest in industrial plasma processing, and the model could be easily extended to serve for industrial gases.

  20. In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy

    DOEpatents

    Braymen, Steven D.

    1996-06-11

    A method and apparatus for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization.

  1. CAPILLARY ELECTROPHORESIS COUPLED ON-LINE WITH INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY FOR ELEMENTAL SPECIATION

    EPA Science Inventory

    A novel interface to connect a capillary electrophoresis (CE) system with an inductively coupled plasma mass spectrometric (ICPMS) detector is reported here. The interface was built using a direct injection nebulizer (DIN) system. In this interface, the CE capillary was placed co...

  2. Determination of Arsenic in Sinus Wash and Tap Water by Inductively Coupled Plasma-Mass Spectrometry

    ERIC Educational Resources Information Center

    Donnell, Anna M.; Nahan, Keaton; Holloway, Dawone; Vonderheide, Anne P.

    2016-01-01

    Arsenic is a toxic element to which humans are primarily exposed through food and water; it occurs as a result of human activities and naturally from the earth's crust. An experiment was developed for a senior level analytical laboratory utilizing an Inductively Coupled Plasma-Mass Spectrometer (ICP-MS) for the analysis of arsenic in household…

  3. An interchangeable-cathode vacuum arc plasma source.

    PubMed

    Olson, David K; Peterson, Bryan G; Hart, Grant W

    2010-01-01

    A simplified vacuum arc design [based on metal vapor vacuum arc (MeVVA) concepts] is employed as a plasma source for a study of a (7)Be non-neutral plasma. The design includes a mechanism for interchanging the cathode source. Testing of the plasma source showed that it is capable of producing on the order of 10(12) charges at confinable energies using a boron-carbide disk as the cathode target. The design is simplified from typical designs for lower energy and lower density applications by using only the trigger spark rather than the full vacuum arc in high current ion beam designs. The interchangeability of the cathode design gives the source the ability to replace only the source sample, simplifying use of radioactive materials in the plasma source. The sample can also be replaced with a completely different conductive material. The design can be easily modified for use in other plasma confinement or full MeVVA applications.

  4. Analysis of the tuning characteristics of microwave plasma source

    NASA Astrophysics Data System (ADS)

    Miotk, Robert; Jasiński, Mariusz; Mizeraczyk, Jerzy

    2016-04-01

    In this paper, we present an analysis of the tuning characteristics of waveguide-supplied metal-cylinder-based nozzleless microwave plasma source. This analysis has enabled to estimate the electron concentration ne and electron frequency collisions ν in the plasma generated in nitrogen and in a mixture of nitrogen and ethanol vapour. The parameters ne and ν are the basic quantities that characterize the plasma. The presented new plasma diagnostic method is particularly useful, when spectroscopic methods are useless. The presented plasma source is currently used in research of a hydrogen production from liquids.

  5. Effect of Inductive Coil Geometry on the Operating Characteristics of a Pulsed Inductive Plasma Accelerator

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.; Kimberlin, Adam C.

    2012-01-01

    Operational characteristics of two separate inductive thrusters with coils of different cone angles are explored through thrust stand measurements and time-integrated, un- filtered photography. Trends in impulse bit measurements indicate that, in the present experimental configuration, the thruster with the inductive coil possessing a smaller cone angle produced larger values of thrust, in apparent contradiction to results of a previous thruster acceleration model. Areas of greater light intensity in photographs of thruster operation are assumed to qualitatively represent locations of increased current density. Light intensity is generally greater in images of the thruster with the smaller cone angle when compared to those of the thruster with the larger half cone angle for the same operating conditions. The intensity generally decreases in both thrusters for decreasing mass ow rate and capacitor voltage. The location of brightest light intensity shifts upstream for decreasing mass ow rate of propellant and downstream for decreasing applied voltage. Recognizing that there typically exists an optimum ratio of applied electric field to gas pressure with respect to breakdown efficiency, this result may indicate that the optimum ratio was not achieved uniformly over the coil face, leading to non-uniform and incomplete current sheet formation in violation of the model assumption of immediate formation where all the injected propellant is contained in a magnetically-impermeable current sheet.

  6. Effect of Inductive Coil Geometry on the Operating Characteristics of an Inductive Pulsed Plasma Thruster

    NASA Technical Reports Server (NTRS)

    Hallock, Ashley K.; Polzin, Kurt A.; Kimberlin, Adam C.; Perdue, Kevin A.

    2012-01-01

    Operational characteristics of two separate inductive thrusters with conical theta pinch coils of different cone angles are explored through thrust stand measurements and time- integrated, unfiltered photography. Trends in impulse bit measurements indicate that, in the present experimental configuration, the thruster with the inductive coil possessing a smaller cone angle produced larger values of thrust, in apparent contradiction to results of a previous thruster acceleration model. Areas of greater light intensity in photographs of thruster operation are assumed to qualitatively represent locations of increased current density. Light intensity is generally greater in images of the thruster with the smaller cone angle when compared to those of the thruster with the larger half cone angle for the same operating conditions. The intensity generally decreases in both thrusters for decreasing mass flow rate and capacitor voltage. The location of brightest light intensity shifts upstream for decreasing mass flow rate of propellant and downstream for decreasing applied voltage. Recognizing that there typically exists an optimum ratio of applied electric field to gas pressure with respect to breakdown efficiency, this result may indicate that the optimum ratio was not achieved uniformly over the coil face, leading to non-uniform and incomplete current sheet formation in violation of the model assumption of immediate formation where all the injected propellant is contained in a magnetically-impermeable current sheet.

  7. Effects of coil location and injection flow rate in an inductively coupled RF plasma torch

    NASA Astrophysics Data System (ADS)

    Wei, D.; Apelian, D.; Farouk, B.

    1985-07-01

    A numerical model has been developed to investigate the effects of central carrier gas flow rate and coil location in an inductively coupled RF plasma torch. Solution algorithm is based on the primitive variable formulation of the Navier-Stokes equations and includes a pseudo two-dimensional electromagnetic field model. Computational results have shown that with increasing carrier gas flow rate, the plasma plume is penetrated and the back flow due to the magnetic pumping effects is diminished. This facilitates the delivery of powder particles into the discharge region. However, the plasma plume is also disturbed significantly thus enhancing power loss.

  8. Temperature dependence of inductively coupled plasma assisted growth of TiN thin films.

    SciTech Connect

    Meng, W. J.; Curtis, T. J.; Rehn, L. E.; Baldo, P. M.; Materials Science Division; Louisiana State Univ.

    1999-11-01

    The use of low pressure high density plasmas to assist the synthesis of ceramic thin film materials is in its infancy. Using an inductively coupled plasma assisted magnetron sputtering system, we examine the dependence of plasma-assisted growth of TiN thin films on growth temperature at different ratios of ion flux to neutral atom flux. Our results indicate that a temperature independent densification of TiN films occurs above a certain ion to neutral atom flux ratio. As an example of this temperature independent densification, we demonstrate the formation of dense B1 TiN crystalline thin films at growth temperatures down to {approx}100 K.

  9. Relationship between the discharge mode and the spatial oxygen plasma distribution in a large size ferrite inductively coupled plasmas

    SciTech Connect

    Kim, Hyun Jun; Hwang, Hye Ju; Cho, Jeong Hee; Chae, Hee Sun; Kim, Dong Hwan; Chung, Chin-Wook

    2015-04-15

    The electrical characteristics and the spatial distribution of oxygen plasma according to the number of turns in ferrite inductively coupled plasmas (ferrite ICPs) are investigated. Through a new ICP model, which includes the capacitive coupling and the power loss of the ferrite material with the conventional ICP model, the variation of the oxygen discharge characteristics depending on the number of turns is simply understood by the electrical measurement, such as the antenna voltages and the currents. As the number of the turns increases, the capacitive coupling dominantly affects the spatial plasma distribution. This capacitive coupling results in a center focused density profile along the radial direction. In spite of the same discharge conditions (discharge chamber, neutral gas, and pressure), the spatial plasma distribution over 450 mm has drastic changes by increasing number of the turns. In addition, the effect of the negative species to the density profile is compared with the argon discharge characteristics at the same discharge configuration.

  10. Technoeconomic analysis for the destruction of toxic liquid wastes using induction plasma technology

    SciTech Connect

    Soucy, G.; Bergeron, E.; Boulos, M.I.

    1995-12-31

    During the past decade, thermal plasma technology has been pointed out as one of the most promising innovative technologies for the thermal destruction of hazardous wastes and for this role, it has been supported by the EPA. In this field, many process alternatives have been developed but insufficient attention have been given to the details of their economic viability. The objective of this paper is to carry out an economic analysis of a particular thermal induction plasma technology for toxic liquid waste destruction. This work is presented in three parts. The first part presents a description of the conceptual design for a process using high frequency (HF) induction plasma. The second part, based on an order-of-magnitude factored estimate, provides an analysis of the capital investment cost of this process. The third part presents an estimation of the operating costs and a discounted cash flow analysis of this conceptual project using a HF plasma generator. The analysis of the economic viability is discussed with reference to the net present worth and the internal rate of return. The discussion examines those variables that significantly affect the viability of such technology by exploring its advantages towards minimizing impacts on the global environment and economic situation. Finally, a comparison is drawn up between the induction plasma technology and other alternative competitive processes.

  11. Synthesis of Core-shell Structured Amorphous Si Nanoparticles by Induction Thermal Plasmas

    NASA Astrophysics Data System (ADS)

    Okamoto, Daisuke; Kageyama, Takuya; Tanaka, Manabu; Sone, Hirotaka; Watanabe, Takayuki

    2015-09-01

    Core-shell structured amorphous Si nanoparticles were synthesized by induction thermal plasma. Crystalline Si powder with 3 μm of average diameter was injected into the induction thermal plasma at 4 MHz. The Si raw materials immediately evaporate in the high temperature plasma region and nanoparticles were produced through the quenching process. Counterflow quenching gas was injected from downstream of the torch with its direction against the plasma flow. The effect of the operating parameter such as flow rate of quenching gas and input power was investigated. Collected particles were characterized by X-ray diffraction, transmission electron microscopy, electron energy-loss spectroscopy, and Raman spectroscopy. Obtained results indicate that amorphization degree of the synthesized nanoparticles is more than 90% when additional quenching gas of 20 L/min is injected. The quenching rate of the prepared nanoparticles in the growth region have an important role on determining the amorphization degree. Moreover, EELS and Raman analyses showed the synthesized nanoparticles were coated by the SiO2 shell with thickness of 2-4 nm. These findings indicated that amorphous Si/SiO2 core-shell structured nanoparticles were successfully synthesized by induction thermal plasma in single step.

  12. Compositionally graded hydroxyapatite/tricalcium phosphate coating on Ti by laser and induction plasma.

    PubMed

    Roy, Mangal; Balla, Vamsi Krishna; Bandyopadhyay, Amit; Bose, Susmita

    2011-02-01

    In this study we report the fabrication of compositionally graded hydroxyapatite (HA) coatings on Ti by combining laser engineering net shaping (LENS) and radio frequency induction plasma spraying processes. Initially, HA powder was embedded in the Ti substrates using LENS, forming a Ti-HA composite layer. Later, RF induction plasma spraying was used to deposit HA on these Ti substrates with a Ti-HA composite layer on top. Phase analysis by X-ray diffraction indicated phase transformation of HA to β-tricalcium phosphate in the laser processed coating. Laser processed coatings showed the formation of a metallurgically sound and diffused substrate-coating interface, which significantly increased the coating hardness to 922 ± 183 Hv from that of the base metal hardness of 189 ± 22 Hv. In the laser processed multilayer coating a compositionally graded nature was successfully achieved, however, with severe cracking and a consequent decrease in the flexural strength of the coating. To obtain a structurally stable coating with a composition gradient across the coating thickness a phase pure HA layer was sprayed on top of the laser processed single layer coatings using induction plasma spray. The plasma sprayed HA coatings were strongly adherent to the LENS-TCP coatings, with adhesive bond strength of 21 MPa. In vitro biocompatibility of these coatings, using human fetal osteoblast cells, showed a clear improvement in cellular activity from uncoated Ti compared with LENS-TCP-coated Ti and reached a maximum in the plasma sprayed HA coating.

  13. Design and simulation of control algorithms for stored energy and plasma current in non-inductive scenarios on NSTX-U

    NASA Astrophysics Data System (ADS)

    Boyer, Mark; Andre, Robert; Gates, David; Gerhardt, Stefan; Menard, Jonathan; Poli, Francesca

    2015-11-01

    One of the major goals of NSTX-U is to demonstrate non-inductive operation. To facilitate this and other program goals, the center stack has been upgraded and a second neutral beam line has been added with three sources aimed more tangentially to provide higher current drive efficiency and the ability to shape the current drive profile. While non-inductive start-up and ramp-up scenarios are being developed, initial non-inductive studies will likely rely on clamping the Ohmic coil current after the plasma current has been established inductively. In this work the ability to maintain control of stored energy and plasma current once the Ohmic coil has been clamped is explored. The six neutral beam sources and the mid-plane outer gap of the plasma are considered as actuators. System identification is done using TRANSP simulations in which the actuators are modulated around a reference shot. The resulting reduced model is used to design an optimal control law with anti-windup and a recently developed framework for closed loop simulations in TRANSP is used to test the control. Limitations due to actuator saturation are assessed and robustness to beam modulation, changes in the plasma density and confinement, and changes in density and temperature profile shapes are studied. Supported by US DOE contract DE-AC02-09CH11466.

  14. Negative ion source with hollow cathode discharge plasma

    DOEpatents

    Hershcovitch, Ady; Prelec, Krsto

    1983-01-01

    A negative ion source of the type where negative ions are formed by bombarding a low-work-function surface with positive ions and neutral particles from a plasma, wherein a highly ionized plasma is injected into an anode space containing the low-work-function surface. The plasma is formed by hollow cathode discharge and injected into the anode space along the magnetic field lines. Preferably, the negative ion source is of the magnetron type.

  15. Negative ion source with hollow cathode discharge plasma

    DOEpatents

    Hershcovitch, A.; Prelec, K.

    1980-12-12

    A negative ion source of the type where negative ions are formed by bombarding a low-work-function surface with positive ions and neutral particles from a plasma, wherein a highly ionized plasma is injected into an anode space containing the low-work-function surface is described. The plasma is formed by hollow cathode discharge and injected into the anode space along the magnetic field lines. Preferably, the negative ion source is of the magnetron type.

  16. The effect of dielectric top lids on materials processing in a low frequency inductively coupled plasma (LF-ICP) reactor

    NASA Astrophysics Data System (ADS)

    Lim, J. W. M.; Chan, C. S.; Xu, L.; Xu, S.

    2014-08-01

    The advent of the plasma revolution began in the 1970's with the exploitation of plasma sources for anisotropic etching and processing of materials. In recent years, plasma processing has gained popularity, with research institutions adopting projects in the field and industries implementing dry processing in their production lines. The advantages of utilizing plasma sources would be uniform processing over a large exposed surface area, and the reduction of toxic emissions. This leads to reduced costs borne by manufacturers which could be passed down as consumer savings, and a reduction in negative environmental impacts. Yet, one constraint that plagues the industry would be the control of contaminants in a plasma reactor which becomes evident when reactions are conducted in a clean vacuum environment. In this work, amorphous silicon (a-Si) thin films were grown on glass substrates in a low frequency inductively coupled plasma (LF-ICP) reactor with a top lid made of quartz. Even though the chamber was kept at high vacuum ( 10-4 Pa), it was evident through secondary ion mass spectroscopy (SIMS) and Fourier-transform infra-red spectroscopy (FTIR) that oxygen contaminants were present. With the aid of optical emission spectroscopy (OES) the contaminant species were identified. The design of the LF-ICP reactor was then modified to incorporate an Alumina (Al2O3) lid. Results indicate that there were reduced amounts of contaminants present in the reactor, and that an added benefit of increased power transfer to the plasma, improving deposition rate of thin films was realized. The results of this study is conclusive in showing that Al2O3 is a good alternative as a top-lid of an LF-ICP reactor, and offers industries a solution in improving quality and rate of growth of thin films.

  17. Characterization of amorphous hydrogenated carbon formed by low-pressure inductively coupled plasma enhanced chemical vapor deposition using multiple low-inductance antenna units.

    PubMed

    Tsuda, Osamu; Ishihara, Masatou; Koga, Yoshinori; Fujiwara, Shuzo; Setsuhara, Yuichi; Sato, Naoyuki

    2005-03-24

    Three-dimensional plasma enhanced chemical vapor deposition (CVD) of hydrogenated amorphous carbon (a-C:H) has been demonstrated using a new type high-density volumetric plasma source with multiple low-inductance antenna system. The plasma density in the volume of phi 200 mm x 100 mm is 5.1 x 10(10) cm(-3) within +/-5% in the lateral directions and 5.2 x 10(10)cm(-3) within +/-10% in the axial direction for argon plasma under the pressure of 0.1 Pa and the total power as low as 400 W. The uniformity of the thickness and refractive index is within +/-3.5% and +/-1%, respectively, for the a-C:H films deposited on the substrates placed on the six side walls, the top of the phi 60 mm x 80 mm hexagonal substrate holder in the pure toluene plasma under the pressure is as low as 0.04 Pa, and the total power is as low as 300 W. It is also found that precisely controlled ion bombardment by pulse biasing led to the explicit observation in Raman and IR spectra of the transition from polymer-like structure to diamond-like structure accompanied by dehydrogenation due to ion bombardment. Moreover, it is also concluded that the pulse biasing technique is effective for stress reduction without a significant degradation of hardness. The stress of 0.6 GPa and the hardness of 15 GPa have been obtained for 2.0 microm thick films deposited with the optimized deposition conditions. The films are durable for the tribology test with a high load of 20 N up to more than 20,000 cycles, showing the specific wear rate and the friction coefficient were 1.2 x 10(-7) mm3/Nm and 0.04, respectively.

  18. Coupled microwave ECR and radio-frequency plasma source for plasma processing

    DOEpatents

    Tsai, C.C.; Haselton, H.H.

    1994-03-08

    In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm[sup 2] at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance. 4 figures.

  19. Coupled microwave ECR and radio-frequency plasma source for plasma processing

    DOEpatents

    Tsai, Chin-Chi; Haselton, Halsey H.

    1994-01-01

    In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm.sup.2 at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance.

  20. Collisionless electron heating in periodic arrays of inductively coupled plasmas

    SciTech Connect

    Czarnetzki, U.; Tarnev, Kh.

    2014-12-15

    A novel mechanism of collisionless heating in large planar arrays of small inductive coils operated at radio frequencies is presented. In contrast to the well-known case of non-local heating related to the transversal conductivity, when the electrons move perpendicular to the planar coil, we investigate the problem of electrons moving in a plane parallel to the coils. Two types of periodic structures are studied. Resonance velocities where heating is efficient are calculated analytically by solving the Vlasov equation. Certain scaling parameters are identified. The concept is further investigated by a single particle simulation based on the ergodic principle and combined with a Monte Carlo code allowing for collisions with Argon atoms. Resonances, energy exchange, and distribution functions are obtained. The analytical results are confirmed by the numerical simulation. Pressure and electric field dependences are studied. Stochastic heating is found to be most efficient when the electron mean free path exceeds the size of a single coil cell. Then the mean energy increases approximately exponentially with the electric field amplitude.

  1. Development and evaluation of high resolution quadrupole mass analyzer and an inductively coupled plasma-Mach disk

    SciTech Connect

    Amad, Ma'an Hazem

    1999-12-10

    By definition a plasma is an electrically conducting gaseous mixture containing a significant concentration of cations and electrons. The Inductively Coupled Plasma (ICP) is an electrodeless discharge in a gas at atmospheric pressure. This discharge is an excellent one for vaporizing, atomizing, and ionizing elements. The early development of the ICP began in 1942 by Babat and then by Reed in the early 1960s. This was then followed by the pioneering work of Fassel and coworkers in the late 1960s. Commercial ICP spectrometers were introduced in the mid 1970s. A major breakthrough in the area of ICP took place in the early 1980s when the ICP was shown to be an excellent ion source for mass spectrometry.

  2. Pulsed microdischarge with inductively coupled plasma mass spectrometry for elemental analysis on solid metal samples.

    PubMed

    Li, Weifeng; Yin, Zhibin; Cheng, Xiaoling; Hang, Wei; Li, Jianfeng; Huang, Benli

    2015-05-01

    Pulsed microdischarge employed as source for direct solid analysis was investigated in N2 environment at atmospheric pressure. Compared with direct current (DC) microdischarge, it exhibits advantages with respect to the ablation and emission of the sample. Comprehensive evidence, including voltage-current relationship, current density (j), and electron density (ne), suggests that pulsed microdischarge is in the arc regime while DC microdischarge belongs to glow. Capability in ablating metal samples demonstrates that pulsed microdischarge is a viable option for direct solid sampling because of the enhanced instantaneous energy. Using optical spectrometer, only common emission lines of N2 can be acquired in DC mode, whereas primary atomic and ionic lines of the sample are obtained in the case of pulsed mode. Calculations show a significant difference in N2 vibrational temperatures between DC and pulsed microdischarge. Combined with inductively coupled plasma mass spectrometry (ICPMS), pulsed microdischarge exhibits much better performances in calibration linearity and limits of detection (LOD) than those of DC discharge in direct analysis of samples of different matrices. To improve transmission efficiency, a mixture of Ar and N2 was employed as discharge gas as well as carrier gas in follow-up experiments, facilitating that LODs of most elements reached ng/g. PMID:25851038

  3. Capillary plasma jet: A low volume plasma source for life science applications

    NASA Astrophysics Data System (ADS)

    Topala, I.; Nagatsu, M.

    2015-02-01

    In this letter, we present results from multispectroscopic analysis of protein films, after exposure to a peculiar plasma source, i.e., the capillary plasma jet. This plasma source is able to generate very small pulsed plasma volumes, in kilohertz range, with characteristic dimensions smaller than 1 mm. This leads to specific microscale generation and transport of all plasma species. Plasma diagnosis was realized using general electrical and optical methods. Depending on power level and exposure duration, this miniature plasma jet can induce controllable modifications to soft matter targets. Detailed discussions on protein film oxidation and chemical etching are supported by results from absorption, X-ray photoelectron spectroscopy, and microscopy techniques. Further exploitation of principles presented here may consolidate research interests involving plasmas in biotechnologies and plasma medicine, especially in patterning technologies, modified biomolecule arrays, and local chemical functionalization.

  4. Capillary plasma jet: A low volume plasma source for life science applications

    SciTech Connect

    Topala, I. E-mail: tmnagat@ipc.shizuoka.ac.jp; Nagatsu, M. E-mail: tmnagat@ipc.shizuoka.ac.jp

    2015-02-02

    In this letter, we present results from multispectroscopic analysis of protein films, after exposure to a peculiar plasma source, i.e., the capillary plasma jet. This plasma source is able to generate very small pulsed plasma volumes, in kilohertz range, with characteristic dimensions smaller than 1 mm. This leads to specific microscale generation and transport of all plasma species. Plasma diagnosis was realized using general electrical and optical methods. Depending on power level and exposure duration, this miniature plasma jet can induce controllable modifications to soft matter targets. Detailed discussions on protein film oxidation and chemical etching are supported by results from absorption, X-ray photoelectron spectroscopy, and microscopy techniques. Further exploitation of principles presented here may consolidate research interests involving plasmas in biotechnologies and plasma medicine, especially in patterning technologies, modified biomolecule arrays, and local chemical functionalization.

  5. Ferroelectric Plasma Source for Heavy Ion Beam ChargeNeutralization

    SciTech Connect

    Efthimion, Philip C.; Gilson, Erik P.; Grisham, Larry; Davidson,Ronald C.; Yu, Simon; Waldron, William; Logan, B. Grant

    2005-10-01

    Plasmas are employed as a source of unbound electrons for charge neutralizing heavy ion beams to allow them to focus to a small spot size. Calculations suggest that plasma at a density of 1-100 times the ion beam density and at a length {approx} 0.1-1 m would be suitable. To produce one-meter plasma, large-volume plasma sources based upon ferroelectric ceramics are being developed. These sources have the advantage of being able to increase the length of the plasma and operate at low neutral pressures. The source utilizes the ferroelectric ceramic BaTiO{sub 3} to form metal plasma. The drift tube inner surface of the Neutralized Drift Compression Experiment (NDCX) will be covered with ceramic, and high voltage ({approx} 1-5 kV) applied between the drift tube and the front surface of the ceramic by placing a wire grid on the front surface. A prototype ferroelectric source 20 cm long has produced plasma densities of 5 x 10{sup 11} cm{sup -3}. The source was integrated into the previous Neutralized Transport Experiment (NTX), and successfully charge neutralized the K{sup +} ion beam. Presently, the one-meter source is being fabricated. The source is being characterized and will be integrated into NDCX for charge neutralization experiments.

  6. Lithium Iron Phosphate Powders and Coatings Obtained by Means of Inductively Coupled Thermal Plasma

    NASA Astrophysics Data System (ADS)

    Major, K.; Veilleux, J.; Brisard, G.

    2016-01-01

    Lithium-ion batteries have high energy efficiency and good cycling life and are considered as one of the best energy storage device for hybrid and/or electrical vehicle. Still, several problems must be solved prior to a broad adoption by the automotive industry: energy density, safety, and costs. To enhance both energy density and safety, the current study aims at depositing binder-free cathode materials using inductively coupled thermal plasma. In a first step, lithium iron phosphate (LiFePO4) powders are synthesized in an inductively coupled thermal plasma reactor and dispersed in a conventional polyvinylidene fluoride (PVDF) binder. Then, binder-free LiFePO4 coatings are directly deposited onto nickel current collectors by solution precursor plasma spraying (SPPS). The morphology, microstructure, and composition of the synthesized LiFePO4 powders and coatings are fully characterized by electronic microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy (XPS). Quantifying Li with XPS requires the substitution of iron with manganese in the SPPS precursors (LiMPO4, where M = Fe or Mn). The plasma-derived cathodes (with and without PVDF binder) are assembled in button cells and tested. Under optimized plasma conditions, cyclic voltammetry shows that the electrochemical reversibility of plasma-derived cathodes is improved over that of conventional sol-gel-derived LiFePO4 cathodes.

  7. Selective killing of ovarian cancer cells through induction of apoptosis by nonequilibrium atmospheric pressure plasma

    SciTech Connect

    Iseki, Sachiko; Tanaka, Hiromasa; Kondo, Hiroki; Hori, Masaru; Nakamura, Kae; Hayashi, Moemi; Kajiyama, Hiroaki; Kikkawa, Fumitaka; Kano, Hiroyuki

    2012-03-12

    Two independent ovarian cancer cell lines and fibroblast controls were treated with nonequilibrium atmospheric pressure plasma (NEAPP). Most ovarian cancer cells were detached from the culture dish by continuous plasma treatment to a single spot on the dish. Next, the plasma source was applied over the whole dish using a robot arm. In vitro cell proliferation assays showed that plasma treatments significantly decreased proliferation rates of ovarian cancer cells compared to fibroblast cells. Flow cytometry and western blot analysis showed that plasma treatment of ovarian cancer cells induced apoptosis. NEAPP could be a promising tool for therapy for ovarian cancers.

  8. Ignition delay of a pulsed inductively coupled plasma (ICP) in tandem with an auxiliary ICP

    NASA Astrophysics Data System (ADS)

    Liu, Lei; Sridhar, Shyam; Donnelly, Vincent M.; Economou, Demetre J.

    2015-12-01

    Plasma ignition delays were observed in a ‘main’ inductively coupled plasma (ICP), in tandem with an ‘auxiliary’ ICP. The Faraday-shielded ICPs were separated by a grounded metal grid. Power (13.56 MHz) to the main ICP was pulsed with a frequency of 1 kHz, while the auxiliary ICP was operated in continuous wave (cw) mode. In chlorine plasmas, ignition delay was observed for duty cycles greater than 60% and, in contrast to expectation, the delay was longer with increasing duty cycle up to ~99.5%. The ignition delay could be varied by changing the auxiliary and/or main ICP power. Langmuir probe measurements provided the temporal evolution of electron temperature, and electron and positive ion densities. These measurements revealed that the plasma was ignited shortly after the decaying positive ion density (n +), in the afterglow of the main ICP, reached the density ({{n}+},\\text{aux} ) prevailing when only the auxiliary ICP was powered. At that time, production of electrons began to dominate their loss in the main ICP, due to hot electron injection from the auxiliary ICP. As a result, {{n}\\text{e}} increased from a value below {{n}\\text{e,\\text{aux}}} , improving inductive power coupling efficiency, further increasing plasma density leading to plasma ignition. Plasma ignition delay occurred when the afterglow of the pulsed plasma was not long enough for the ion density to reach {{n}+},\\text{aux} during the afterglow. Besides Cl2, plasma ignition delays were also observed in other electronegative gases (SF6, CF4/O2 and O2) but not in an electropositive gas (Ar).

  9. Induction of angiogenesis by normal and malignant plasma cells.

    PubMed

    Hose, Dirk; Moreaux, Jérôme; Meissner, Tobias; Seckinger, Anja; Goldschmidt, Hartmut; Benner, Axel; Mahtouk, Karène; Hillengass, Jens; Rème, Thierry; De Vos, John; Hundemer, Michael; Condomines, Maud; Bertsch, Uta; Rossi, Jean-François; Jauch, Anna; Klein, Bernard; Möhler, Thomas

    2009-07-01

    Abundant bone marrow angiogenesis is present in almost all myeloma patients requiring therapy and correlated to treatment response and survival. We assessed the expression of 402 angiogenesis-associated genes by Affymetrix DNA microarrays in 466 samples, including CD138-purified myeloma cells (MMCs) from 300 previously untreated patients, in vivo microcirculation by dynamic contrast-enhanced magnetic resonance imaging, and in vitro angiogenesis (AngioKit-assay). Normal bone marrow plasma cells (BMPCs) express a median of 39 proangiogenic (eg, VEGFA, ADM, IGF-1) and 28 antiangiogenic genes (eg, TIMP1, TIMP2). Supernatants of BMPCs unlike those of memory B cells induce angiogenesis in vitro. MMCs do not show a significantly higher median number of expressed proangiogenic (45) or antiangiogenic (31) genes, but 97% of MMC samples aberrantly express at least one of the angiogenic factors HGF, IL-15, ANG, APRIL, CTGF, or TGFA. Supernatants of MMCs and human myeloma cell lines induce significantly higher in vitro angiogenesis compared with BMPCs. In conclusion, BMPCs express a surplus of proangiogenic over antiangiogenic genes transmitting to the ability to induce in vitro angiogenesis. Aberrant expression of proangiogenic and down-regulation of antiangiogenic genes by MMCs further increases the angiogenic stimulus, together leading to bone marrow angiogenesis at various degrees in all myeloma patients.

  10. Shunting arc plasma source for pure carbon ion beam.

    PubMed

    Koguchi, H; Sakakita, H; Kiyama, S; Shimada, T; Sato, Y; Hirano, Y

    2012-02-01

    A plasma source is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA∕mm(2) at the peak of the pulse.

  11. Shunting arc plasma source for pure carbon ion beama)

    NASA Astrophysics Data System (ADS)

    Koguchi, H.; Sakakita, H.; Kiyama, S.; Shimada, T.; Sato, Y.; Hirano, Y.

    2012-02-01

    A plasma source is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA/mm2 at the peak of the pulse.

  12. Public Data Set: Impedance of an Intense Plasma-Cathode Electron Source for Tokamak Plasma Startup

    DOE Data Explorer

    Hinson, Edward T. [University of Wisconsin-Madison] (ORCID:000000019713140X); Barr, Jayson L. [University of Wisconsin-Madison] (ORCID:0000000177685931); Bongard, Michael W. [University of Wisconsin-Madison] (ORCID:0000000231609746); Burke, Marcus G. [University of Wisconsin-Madison] (ORCID:0000000176193724); Fonck, Raymond J. [University of Wisconsin-Madison] (ORCID:0000000294386762); Perry, Justin M. [University of Wisconsin-Madison] (ORCID:0000000171228609)

    2016-05-31

    This data set contains openly-documented, machine readable digital research data corresponding to figures published in E.T. Hinson et al., 'Impedance of an Intense Plasma-Cathode Electron Source for Tokamak Plasma Startup,' Physics of Plasmas 23, 052515 (2016).

  13. Documenting utility of paddlefish otoliths for quantification of metals using inductively coupled plasma mass spectrometry

    USGS Publications Warehouse

    Long, James M.; Schaffler, James J.

    2013-01-01

    RATIONALE The otoliths of the inner ear of fishes record the environment of their surrounding water throughout their life. For paddlefish (Polyodon spathula), otoliths have not been routinely used by scientists since their detriments were outlined in the early 1940s. We sought to determine if paddlefish otoliths were useful for resolving elemental information contained within. METHODS Adult paddlefish were collected from two wild, self-sustaining populations in Oklahoma reservoirs in the Arkansas River basin. Juveniles were obtained from a hatchery in the Red River basin of Oklahoma. Otoliths were removed and laser ablation, inductively coupled plasma mass spectrometry (ICP-MS) was used to quantify eight elements (Li, Mg, Mn, Rb, Sr, Y, Ba, and Pb) along the core and edge portions, which were analyzed for differences between otolith regions and among paddlefish sources. RESULTS Differences were found among samples for six of the eight elements examined. Otoliths from Red River basin paddlefish born in a hatchery had significantly lower amounts of Mg and Mn, but higher levels of Rb than otoliths from wild paddlefish in the Arkansas River basin. Concentrations of Y, Sr, and Ba were reduced on the edges of adult paddlefish from both reservoirs compared with the cores. CONCLUSIONS This research shows the utility of using an ICP-MS analysis of paddlefish otoliths. Future research that seeks to determine sources of paddlefish production, such as which reservoir tributaries are most important for reproduction or what proportion of the population is composed of wild versus hatchery-produced individuals, appears promising. Published in 2013. This article is a U.S. Government work and is in the public domain in the USA.

  14. Counter-facing plasma guns for efficient extreme ultra-violet plasma light source

    NASA Astrophysics Data System (ADS)

    Kuroda, Yusuke; Yamamoto, Akiko; Kuwabara, Hajime; Nakajima, Mitsuo; Kawamura, Tohru; Horioka, Kazuhiko

    2013-11-01

    A plasma focus system composed of a pair of counter-facing coaxial guns was proposed as a long-pulse and/or repetitive high energy density plasma source. We applied Li as the source of plasma for improvement of the conversion efficiency, the spectral purity, and the repetition capability. For operation of the system with ideal counter-facing plasma focus mode, we changed the system from simple coaxial geometry to a multi-channel configuration. We applied a laser trigger to make synchronous multi-channel discharges with low jitter. The results indicated that the configuration is promising to make a high energy density plasma with high spectral efficiency.

  15. Measurements of plasma bremsstrahlung and plasma energy density produced by electron cyclotron resonance ion source plasmas

    NASA Astrophysics Data System (ADS)

    Noland, Jonathan David

    2011-12-01

    The goal of this dissertation was to gain an understanding on the relative importance of microwave power, neutral pressure, and magnetic field configuration on the behavior of the hot electrons within an Electron Cyclotron Resonance Ion Source (ECRIS) plasma. This was carried out through measurement of plasma bremsstrahlung with both NaI(Tl) (hv > 30 keV) and CdTe (2 keV < hv < 70 keV) x-ray detectors, and through measurement of the plasma energy density with a diamagnetic loop placed around the plasma chamber. We also examined the anisotropy in x-ray power by simultaneously measuring the x-ray spectra in two orthogonal directions: radially and axially, using NaI(Tl) detectors. We have seen that for a 6.4 GHz ECRIS, both the x-ray power produced by confined electrons and the plasma energy density behave logarithmically with microwave power. The x-ray flux created by electrons lost from the plasma, however, does not saturate. Thus, the small increase in plasma density that occurred at high microwave powers (> 150 W on a 6.4 GHz ECRIS) was accompanied by a large increase in total x-ray power. We suggest that the saturation of x-ray power and plasma energy density was due to rf-induced pitch-angle scattering of the electrons. X-ray power and plasma energy density were also shown to saturate with neutral pressure, and to increase nearly linearly as the gradient of the magnetic field in the resonance zone was decreased. All of these findings were in agreement with the theoretical models describing ECRIS plasmas. We have discussed the use of a diamagnetic loop as a means of exploring various plasma time scales on a relative basis. Specifically, we focused much of our attention on studying how changing ion source parameters, such as microwave power and neutral pressure, would effect the rise and decay of the integrated diamagnetic signal, which can be related to plasma energy density. We showed that increasing microwave power lowers the e-fold times at both the leading

  16. Automated control of linear constricted plasma source array

    DOEpatents

    Anders, Andre; Maschwitz, Peter A.

    2000-01-01

    An apparatus and method for controlling an array of constricted glow discharge chambers are disclosed. More particularly a linear array of constricted glow plasma sources whose polarity and geometry are set so that the contamination and energy of the ions discharged from the sources are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The quality of film along deposition "tracks" opposite the plasma sources can be measured and compared to desired absolute or relative values by optical and/or electrical sensors. Plasma quality can then be adjusted by adjusting the power current values, gas feed pressure/flow, gas mixtures or a combination of some or all of these to improve the match between the measured values and the desired values.

  17. Experimental investigation of the Boltzmann relation for a bi-Maxwellian distribution in inductively coupled plasmas

    SciTech Connect

    Bang, Jin Young; Chung, Chin Wook

    2009-09-15

    In plasma, the Boltzmann relation is often used to connect the electron density to the plasma potential because it is not easy to calculate electric potentials on the basis of the Poisson equation due to the quasineutrality. From the Boltzmann relation, the electric potential can be simply obtained from the electron density or vice versa. However, the Boltzmann relation assumes that electrons are in thermal equilibrium and have a Maxwellian distribution, so it cannot be applied to non-Maxwellian distributions. In this paper, the Boltzmann relation for bi-Maxwellian distributions was newly derived from fluid equations and the comparison with the experimental results was given by measuring electron energy probability functions in an inductively coupled plasma. It was found that the spatial distribution of the electron density in bulk plasma is governed by the effective electron temperature, while that of the cold and hot electrons are governed by each electron temperature.

  18. Electron density measurement of inductively coupled plasmas by terahertz time-domain spectroscopy (THz-TDS)

    SciTech Connect

    Ando, Ayumi; Kurose, Tomoko; Kitano, Katsuhisa; Hamaguchi, Satoshi; Reymond, Vivien; Kitahara, Hideaki; Takano, Keisuke; Hangyo, Masanori; Tani, Masahiko

    2011-10-01

    The electron densities of argon inductively coupled plasmas were measured by terahertz time-domain spectroscopy (THz-TDS). At a low pressure, the electron densities were also measured with a Langmuir-type double probe and the validity of THz-TDS electron-density measurement in a plasma has been corroborated. As the input radio-frequency (RF) power increases, the plasma density and gas temperature increase, which makes the probe measurement less reliable or even impossible, due to the large heat load to the probe surface. On the contrary, the THz-TDS measurement is unaffected by the gas temperature and becomes more reliable due to the higher electron density at higher input power for plasma generation.

  19. Langmuir Probe Measurements in an Inductively Coupled Ar/CF4 Plasmas

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Meyyappan, M.; Sharma, S. P.; Arnold, James O. (Technical Monitor)

    2000-01-01

    Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

  20. Numerical and Experimental Investigation on the Attenuation of Electromagnetic Waves in Unmagnetized Plasmas Using Inductively Coupled Plasma Actuator

    NASA Astrophysics Data System (ADS)

    Lin, Min; Xu, Haojun; Wei, Xiaolong; Liang, Hua; Song, Huimin; Sun, Quan; Zhang, Yanhua

    2015-10-01

    The attenuation of electromagnetic (EM) waves in unmagnetized plasma generated by an inductively coupled plasma (ICP) actuator has been investigated both theoretically and experimentally. A numerical study is conducted to investigate the propagation of EM waves in multilayer plasma structures which cover a square flat plate. Experimentally, an ICP actuator with dimensions of 20 cm×20 cm×4 cm is designed to produce a steady plasma slab. The attenuation of EM waves in the plasma generated by the ICP actuator is measured by a reflectivity arch test method at incident waves of 2.3 GHz and 10.1 GHz, respectively. A contrastive analysis of calculated and measured results of these incident wave frequencies is presented, which suggests that the experiment accords well with our theory. As expected, the plasma slab generated by the ICP actuator can effectively attenuate the EM waves, which may have great potential application prospects in aircraft stealth. supported by National Natural Science Foundation of China (Nos. 51276197, 11472306 and 11402301)

  1. Plasma Ion Sources for Atmospheric Pressure Ionization Mass Spectrometry.

    NASA Astrophysics Data System (ADS)

    Zhao, Jian-Guo

    1994-01-01

    Atmospheric pressure ionization (API) sources using direct-current (DC) and radio-frequency (RF) plasma have been developed in this thesis work. These ion sources can provide stable discharge currents of ~ 1 mA, 2-3 orders of magnitude larger than that of the corona discharge, a widely used API source. The plasmas can be generated and maintained in 1 atm of various buffer gases by applying -500 to -1000 V (DC plasma) or 1-15 W with a frequency of 165 kHz (RF plasma) on the needle electrode. These ion sources have been used with liquid injection to detect various organic compounds of pharmaceutical, biotechnological and environmental interest. Key features of these ion sources include soft ionization with the protonated molecule as the largest peak, and superb sensitivity with detection limits in the low picogram or femtomole range and a linear dynamic range over ~4 orders of magnitude. The RF plasma has advantages over the DC plasma in its ability to operate in various buffer gases and to produce a more stable plasma. Factors influencing the performance of the ion sources have been studied, including RF power level, liquid flow rate, chamber temperature, solvent composition, and voltage affecting the collision induced dissociation (CID). Ionization of hydrocarbons by the RF plasma API source was also studied. Soft ionization is generally produced. To obtain high sensitivity, the ion source must be very dry and the needle-to-orifice distance must be small. Nitric oxide was used to enhance the sensitivity. The RF plasma source was then used for the analysis of hydrocarbons in auto emissions. Comparisons between the corona discharge and the RF plasma have been made in terms of discharge current, ion residence time, and the ion source model. The RF plasma source provides larger linear dynamic range and higher sensitivity than the corona discharge, due to its much larger discharge current. The RF plasma was also observed to provide longer ion residence times and was not

  2. Inductive Pulsed Plasma Thruster Model with Time-Evolution of Energy and State Properties

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.; Sankaran, Kamesh

    2012-01-01

    A model for pulsed inductive plasma acceleration is presented that consists of a set of circuit equations coupled to both a one-dimensional equation of motion and an equation governing the partitioning of energy. The latter two equations are obtained for the plasma current sheet by treating it as a single element of finite volume and integrating the governing equations over that volume. The integrated terms are replaced where necessary by physically-equivalent quantities that are calculated through the solution of other parts of the governing equation set. The model improves upon previous one-dimensional performance models by permitting the time-evolution of the energy and state properties of the plasma, the latter allowing for the tailoring of the model to different gases that may be chosen as propellants. The time evolution of the various energy modes in the system and the associated plasma properties, calculated for argon propellant, are presented to demonstrate the efficacy of the model. The model produces a result where efficiency is maximized at a given value of the electrodynamic scaling term known as the dynamic impedance parameter. Qualitatively and quantitatively, the model compares favorably with performance measured for two separate inductive pulsed plasma thrusters, with disagreements attributable to simplifying assumptions employed in the generation of the model solution.

  3. Cl{sub 2}-based dry etching of the AlGaInN system in inductively coupled plasmas

    SciTech Connect

    Cho, Hyun; Vartuli, C.B.; Abernathy, C.R.; Donovan, S.M.; Pearton, S.J.; Shul, R.J.; Han, J.

    1997-12-01

    Cl{sub 2}-based Inductively Coupled Plasmas with low additional dc self- biases(-100V) produce convenient etch rates(500-1500 A /min) for GaN, AlN, InN, InAlN and InGaN. A systematic study of the effects of additive gas(Ar, N{sub 2}, H{sub 2}), discharge composition and ICP source power and chuck power on etch rate and surface morphology has been performed. The general trends are to go through a maximum in etch rate with percent Cl{sub 2} in the discharge for all three mixtures, and to have an increase(decrease) in etch rate with source power(pressure). Since the etching is strongly ion-assisted, anisotropic pattern transfer is readily achieved. Maximum etch selectivities of approximately 6 for InN over the other nitrides were obtained.

  4. Induction-linac based free-electron laser amplifiers for plasma heating

    SciTech Connect

    Jong, R.A.

    1988-08-22

    We describe an induction-linac based free-electron laser amplifier that is presently under construction at the Lawrence Livermore National Laboratory. It is designed to produce up to 2 MW of average power at a frequency of 250 GHz for plasma heating experiments in the Microwave Tokamak Experiment. In addition, we shall describe a FEL amplifier design for plasma heating of advanced tokamak fusion devices. This system is designed to produce average power levels of about 10 MW at frequencies ranging form 280 to 560 GHz. 7 refs., 1 tab.

  5. Optical emission spectroscopy studies of the influence of laserablated mass on dry inductively coupled plasma conditions

    SciTech Connect

    Ciocan, A.C.; Mao, X.L.; Borisov, Oleg V.; Russo, R.E.

    1997-07-01

    The amount of ablated mass can influence the temperature andexcitation characteristics of the inductively coupled plasma (ICP) andmust be taken into account to ensure accurate chemical analysis. The ICPelectron number density was investigated by using measurements of the Mgionic to atomic resonant-line ratios during laser ablation of an aluminummatrix. The ICP excitation temperature was measured by using selected Felines during laser ablation of an iron matrix. A Nd:YAG laser (3 ns pulseduration) at 266 nm was used for these ablation-sampling studies. Laserenergy, power density, and repetition rate were varied in order to changethe quantity of ablated mass into the ICP. Over the range of laseroperating conditions studied herein, the ICP was not significantlyinfluenced by the quantity of solid sample. Therefore, analyticalmeasurements can be performed accurately and fundamental studies of laserablation processes (such as ablation mass roll-off, fractionalvaporization) can be investigated using inductively coupled plasma-atomicemission spectroscopy (ICP-AES).

  6. In situ calibration of inductively coupled plasma-atomic emission and mass spectroscopy

    DOEpatents

    Braymen, S.D.

    1996-06-11

    A method and apparatus are disclosed for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present in situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization. 5 figs.

  7. Iron-Isotopic Fractionation Studies Using Multiple Collector Inductively Coupled Plasma Mass Spectrometry

    NASA Technical Reports Server (NTRS)

    Anbar, A. D.; Zhang, C.; Barling, J.; Roe, J. E.; Nealson, K. H.

    1999-01-01

    The importance of Fe biogeochemistry has stimulated interest in Fe isotope fractionation. Recent studies using thermal ionization mass spectrometry (TIMS) and a "double spike" demonstrate the existence of biogenic Fe isotope effects. Here, we assess the utility of multiple-collector inductively-coupled plasma mass spectrometry(MC-ICP-MS) with a desolvating sample introduction system for Fe isotope studies, and present data on Fe biominerals produced by a thermophilic bacterium. Additional information is contained in the original extended abstract.

  8. Boron determination in steels by Inductively-Coupled Plasma spectometry (ICP)

    NASA Technical Reports Server (NTRS)

    Coedo, A. G.; Lopez, M. T. D.

    1986-01-01

    The sample is treated with 5N H2SO4 followed by concentrated HNO3 and the diluted mixture is filtered. Soluble B is determined in the filtrate by Inductively-Coupled Plasma (ICP) spectrometry after addition HCl and extraction of Fe with ethyl-ether. The residue is fused with Na2CO3 and, after treatment with HCl, the insoluble B is determined by ICP spectrometry as before. The method permits determination of ppm amounts of B in steel.

  9. Performance scaling of inductive pulsed plasma thrusters with coil angle and pulse rate

    NASA Astrophysics Data System (ADS)

    Martin, A. K.

    2016-01-01

    A circuit model for an inductive pulsed plasma thruster was developed in order to investigate the performance of thrusters with conical coils; the model can accommodate cone-angles from 0° (a straight theta-pinch coil) to 90° (a planar coil). The plasma is treated as a deformable slug that moves both radially and axially in response to the force applied by the coil. The radial equation of motion includes a restoring force due to the plasma pressure, which is derived under the assumption that the electron population is isothermal, while the ions are isothermal, adiabatic, or shock-heated depending on the magnitude and sign of the radial velocity. The inductance of the coil and the plasma slug, and their mutual inductance, was determined using QuickField. A local maximum in efficiency and specific impulse was found for angles less than 90° however the absolute maximum for both these quantities occurs at 90°. High pulse-rate operation was found to yield dynamic efficiencies (excluding ionization cost) as high as 60-70% for I SP in the range of 3000-5000 s, even for a device with modest jet-power (5 kW). This mode of operation also permits elimination of the pulsed gas valve, which would be a significant system-level simplification. An alternate mode of inductive recapture, in which the current is interrupted at the second zero-crossing, was found to result in a sacrifice of only 1-2% in efficiency, while offering other significant system-level benefits for this kind of thruster.

  10. Hardening of the surface plasma jet high-frequency induction discharge of low pressure

    NASA Astrophysics Data System (ADS)

    Kashapov, N. F.; Sharifullin, S. N.

    2015-06-01

    The work presents results of research on the hardening surfaces of the products and increase their roughness class of plasma jet of high-frequency induction discharge of low pressure. It is shown that such processing allows to clear at the same time a surface of all types of pollution, to remove a defective layer after its machining, to receive a uniform microstructure, to raise a roughness class on 2 - 3 units.

  11. Laser Plasma Particle Accelerators: Large Fields for Smaller Facility Sources

    SciTech Connect

    Geddes, Cameron G.R.; Cormier-Michel, Estelle; Esarey, Eric H.; Schroeder, Carl B.; Vay, Jean-Luc; Leemans, Wim P.; Bruhwiler, David L.; Cary, John R.; Cowan, Ben; Durant, Marc; Hamill, Paul; Messmer, Peter; Mullowney, Paul; Nieter, Chet; Paul, Kevin; Shasharina, Svetlana; Veitzer, Seth; Weber, Gunther; Rubel, Oliver; Ushizima, Daniela; Bethel, Wes; Wu, John

    2009-03-20

    Compared to conventional particle accelerators, plasmas can sustain accelerating fields that are thousands of times higher. To exploit this ability, massively parallel SciDAC particle simulations provide physical insight into the development of next-generation accelerators that use laser-driven plasma waves. These plasma-based accelerators offer a path to more compact, ultra-fast particle and radiation sources for probing the subatomic world, for studying new materials and new technologies, and for medical applications.

  12. Matching network for RF plasma source

    SciTech Connect

    Pickard, Daniel S.; Leung, Ka-Ngo

    2007-11-20

    A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.

  13. Conditioning of ion sources for mass spectrometry of plasmas

    SciTech Connect

    Dylla, H.F.; Blanchard, W.R.

    1983-02-01

    Mass spectrometry is a useful diagnostic technique for monitoring plasma species and plasma-surface interactions. In order to maximize the sensitivity of measurements of hydrogen-fueled fusion plasmas or hydrogen-based discharge cleaning and etching plasmas, the ion sources of mass spectrometers are operated at or near the high pressure limit of 10/sup -4/ Torr (10/sup -2/ Pa). Such high ambient pressures of hydrogen give rise to high background levels of residual gases such as H/sub 2/O, CO, and CH/sub 4/, due to surface reactions on the ion source electrodes. For a commonly used ion source configuration, the residual gas production is a linear function of the ambient H/sub 2/ pressure. Hydrogen conditioning can reduce the absolute residual gas levels. Steady-state residual gas production is observed in a conditioned ion source, which is related to a balance of diffusion and sorption on the electrode surfaces.

  14. The Thermal Ion Dynamics Experiment and Plasma Source Instrument

    NASA Technical Reports Server (NTRS)

    Moore, T. E.; Chappell, C. R.; Chandler, M. O.; Fields, S. A.; Pollock, C. J.; Reasoner, D. L.; Young, D. T.; Burch, J. L.; Eaker, N.; Waite, J. H., Jr.; McComas, D. J.; Nordholdt, J. E.; Thomsen, M. F.; Berthelier, J. J.; Robson, R.

    1995-01-01

    The Thermal Ion Dynamics Experiment (TIDE) and the Plasma Source Instrument (PSI) have been developed in response to the requirements of the ISTP Program for three-dimensional (3D) plasma composition measurements capable of tracking the circulation of low-energy (0-500 eV) plasma through the polar magnetosphere. This plasma is composed of penetrating magnetosheath and escaping ionospheric components. It is in part lost to the downstream solar wind and in part recirculated within the magnetosphere, participating in the formation of the diamagnetic hot plasma sheet and ring current plasma populations. Significant obstacles which have previously made this task impossible include the low density and energy of the outflowing ionospheric plasma plume and the positive spacecraft floating potentials which exclude the lowest-energy plasma from detection on ordinary spacecraft. Based on a unique combination of focusing electrostatic ion optics and time of flight detection and mass analysis, TIDE provides the sensitivity (seven apertures of about 1 cm squared effective area each) and angular resolution (6 x 18 degrees) required for this purpose. PSI produces a low energy plasma locally at the POLAR spacecraft that provides the ion current required to balance the photoelectron current, along with a low temperature electron population, regulating the spacecraft potential slightly positive relative to the space plasma. TIDE/PSI will: (a) measure the density and flow fields of the solar and terrestrial plasmas within the high polar cap and magnetospheric lobes; (b) quantify the extent to which ionospheric and solar ions are recirculated within the distant magnetotail neutral sheet or lost to the distant tail and solar wind; (c) investigate the mass-dependent degree energization of these plasmas by measuring their thermodynamic properties; (d) investigate the relative roles of ionosphere and solar wind as sources of plasma to the plasma sheet and ring current.

  15. Inductively coupled plasma mass spectrometry for stable isotope metabolic tracer studies of living systems

    SciTech Connect

    Luong, E.

    1999-05-10

    This dissertation focuses on the development of methods for stable isotope metabolic tracer studies in living systems using inductively coupled plasma single and dual quadrupole mass spectrometers. Sub-nanogram per gram levels of molybdenum (Mo) from human blood plasma are isolated by the use of anion exchange alumina microcolumns. Million-fold more concentrated spectral and matrix interferences such as sodium, chloride, sulfate, phosphate, etc. in the blood constituents are removed from the analyte. The recovery of Mo from the alumina column is 82 {+-} 5% (n = 5). Isotope dilution inductively coupled plasma mass spectrometry (ID-ICP-MS) is utilized for the quantitative ultra-trace concentration determination of Mo in bovine and human blood samples. The average Mo concentration in reference bovine serum determined by this method is 10.2 {+-} 0.4 ng/g, while the certified value is 11.5 {+-} 1.1 ng/g (95% confidence interval). The Mo concentration of one pool of human blood plasma from two healthy male donors is 0.5 {+-} 0.1 ng/g. The inductively coupled plasma twin quadrupole mass spectrometer (ICP-TQMS) is used to measure the carbon isotope ratio from non-volatile organic compounds and bio-organic molecules to assess the ability as an alternative analytical method to gas chromatography combustion isotope ratio mass spectrometry (GC-combustion-IRMS). Trytophan, myoglobin, and {beta}-cyclodextrin are chosen for the study, initial observation of spectral interference of {sup 13}C{sup +} with {sup 12}C{sup 1}H{sup +} comes from the incomplete dissociation of myoglobin and/or {beta}-cyclodextrin.

  16. Two-Dimensional Analysis of Conical Pulsed Inductive Plasma Thruster Performance

    NASA Technical Reports Server (NTRS)

    Hallock, A. K.; Polzin, K. A.; Emsellem, G. D.

    2011-01-01

    A model of the maximum achievable exhaust velocity of a conical theta pinch pulsed inductive thruster is presented. A semi-empirical formula relating coil inductance to both axial and radial current sheet location is developed and incorporated into a circuit model coupled to a momentum equation to evaluate the effect of coil geometry on the axial directed kinetic energy of the exhaust. Inductance measurements as a function of the axial and radial displacement of simulated current sheets from four coils of different geometries are t to a two-dimensional expression to allow the calculation of the Lorentz force at any relevant averaged current sheet location. This relation for two-dimensional inductance, along with an estimate of the maximum possible change in gas-dynamic pressure as the current sheet accelerates into downstream propellant, enables the expansion of a one-dimensional circuit model to two dimensions. The results of this two-dimensional model indicate that radial current sheet motion acts to rapidly decouple the current sheet from the driving coil, leading to losses in axial kinetic energy 10-50 times larger than estimations of the maximum available energy in the compressed propellant. The decreased available energy in the compressed propellant as compared to that of other inductive plasma propulsion concepts suggests that a recovery in the directed axial kinetic energy of the exhaust is unlikely, and that radial compression of the current sheet leads to a loss in exhaust velocity for the operating conditions considered here.

  17. Two dimensional self-consistent fluid simulation of rf inductive sources

    SciTech Connect

    DiPeso, G.; Vahedi, V.; Hewett, D.W.; Rognlien, T.D.

    1993-11-17

    The two-dimensional (R - Z) electromagnetic code FMRZ has been written to model inductive sources self-consistently in time. The code models an argon plasma with momentum-transfer, excitation and ionization as electron-neutral reactions and scattering and charge-exchange for the ion-neutral reactions. The electrons and ions are treated as Maxwellian fluid species and a reduced set of Maxwell`s equations is used to advance the electromagnetic fields. The set of equations used in FMRZ is not subject to typical numerical constraints present in many time dynamic codes allowing one to choose appropriate the and space scales to resolve only the frequencies and scale lengths of interest. The model retains nonlinear driving terms which give rise to a pondermotive force that distorts the density profile. Density and power profiles will be used to illustrate the physical effects of various terms in the equations. Trends in average density and temperature compare well with an analytic model.

  18. Helicon Plasma Source Configuration Analysis by Means of Density Measurements

    SciTech Connect

    Angrilli, F.; Barber, G.C.; Carter, M.D.; Goulding, R.H.; Maggiora, R.; Pavarin, D.; Sparks, D.O.

    1999-11-13

    Initial results have been obtained from operation of a helicon plasma source built to conduct optimization studies for space propulsion applications. The source features an easily reconfigurable antenna to test different geometries. Operating with He as the source gas, peak densities >= 1.6X10{sup 19} m{sup -3} have been achieved. Radial and axial plasma profiles have been obtained using a microwave interferometer that can be scanned axially and a Langmuir probe. The source will be used to investigate operation at high magnetic field, frequency, and input power.

  19. Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization

    NASA Astrophysics Data System (ADS)

    Gans, T.; Osiac, M.; O'Connell, D.; Kadetov, V. A.; Czarnetzki, U.; Schwarz-Selinger, T.; Halfmann, H.; Awakowicz, P.

    2005-05-01

    Sterilization of bio-medical materials using radio frequency (RF) excited inductively coupled plasmas (ICPs) has been investigated. A double ICP has been developed and studied for homogenous treatment of three-dimensional objects. Sterilization is achieved through a combination of ultraviolet light, ion bombardment and radical treatment. For temperature sensitive materials, the process temperature is a crucial parameter. Pulsing of the plasma reduces the time average heat strain and also provides additional control of the various sterilization mechanisms. Certain aspects of pulsed plasmas are, however, not yet fully understood. Phase resolved optical emission spectroscopy and time resolved ion energy analysis illustrate that a pulsed ICP ignites capacitively before reaching a stable inductive mode. Time resolved investigations of the post-discharge, after switching off the RF power, show that the plasma boundary sheath in front of a substrate does not fully collapse for the case of hydrogen discharges. This is explained by electron heating through super-elastic collisions with vibrationally excited hydrogen molecules.

  20. Induction of plasma acetylcholinesterase activity in mice challenged with organophosphorus poisons

    SciTech Connect

    Duysen, Ellen G.; Lockridge, Oksana

    2011-09-01

    The restoration of plasma acetylcholinesterase activity in mice following inhibition by organophosphorus pesticides and nerve agents has been attributed to synthesis of new enzyme. It is generally assumed that activity levels return to normal, are stable and do not exceed the normal level. We have observed over the past 10 years that recovery of acetylcholinesterase activity levels in mice treated with organophosphorus agents (OP) exceeds pretreatment levels and remains elevated for up to 2 months. The most dramatic case was in mice treated with tri-cresyl phosphate and tri-ortho-cresyl phosphate, where plasma acetylcholinesterase activity rebounded to a level 250% higher than the pretreatment activity. The present report summarizes our observations on plasma acetylcholinesterase activity in mice treated with chlorpyrifos, chlorpyrifos oxon, diazinon, tri-ortho-cresyl phosphate, tri-cresyl phosphate, tabun thiocholine, parathion, dichlorvos, and diisopropylfluorophosphate. We have developed a hypothesis to explain the excess acetylcholinesterase activity, based on published observations. We hypothesize that acetylcholinesterase activity is induced when cells undergo apoptosis and that consequently there is a rise in the level of plasma acetylcholinesterase. - Highlights: > Acetylcholinesterase activity is induced by organophosphorus agents. > AChE induction is related to apoptosis. > Induction of AChE activity by OP is independent of BChE.

  1. Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources

    DOEpatents

    Kubiak, Glenn D.; Bernardez, II, Luis J.

    2000-01-04

    A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasma sources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10.sup.7 Xe plasma pulses.

  2. Determination of total tin in canned food using inductively coupled plasma atomic emission spectroscopy.

    PubMed

    Perring, Loïc; Basic-Dvorzak, Marija

    2002-09-01

    Tin is considered to be a priority contaminant by the Codex Alimentarius Commission. Tin can enter foods either from natural sources, environmental pollution, packaging material or pesticides. Higher concentrations are found in processed food and canned foods. Dissolution of the tinplate depends on the of food matrix, acidity, presence of oxidising reagents (anthocyanin, nitrate, iron and copper) presence of air (oxygen) in the headspace, time and storage temperature. To reduce corrosion and dissolution of tin, nowadays cans are usually lacquered, which gives a marked reduction of tin migration into the food product. Due to the lack of modern validated published methods for food products, an ICP-AES (Inductively coupled plasma-atomic emission spectroscopy) method has been developed and evaluated. This technique is available in many laboratories in the food industry and is more sensitive than atomic absorption. Conditions of sample preparation and spectroscopic parameters for tin measurement by axial ICP-AES were investigated for their ruggedness. Two methods of preparation involving high-pressure ashing or microwave digestion in volumetric flasks were evaluated. They gave complete recovery of tin with similar accuracy and precision. Recoveries of tin from spiked products with two levels of tin were in the range 99+/-5%. Robust relative repeatabilities and intermediate reproducibilities were <5% for different food matrices containing >30 mg/kg of tin. Internal standard correction (indium or strontium) did not improve the method performance. Three emission lines for tin were tested (189.927, 283.998 and 235.485 nm) but only 189.927 nm was found to be robust enough with respect to interferences, especially at low tin concentrations. The LOQ (limit of quantification) was around 0.8 mg/kg at 189.927 nm. A survey of tin content in a range of canned foods is given. PMID:12324843

  3. Surface Plasma Source Electrode Activation by Surface Impurities

    SciTech Connect

    Dudnikov, Vadim; Han, Baoxi; Johnson, Rolland P.; Murray Jr, S N; Pennisi, Terry R; Santana, Manuel; Stockli, Martin P; Welton, Robert F

    2011-01-01

    In experiments with RF saddle antenna surface plasma sources (SPS), the efficiency of H- ion generation was increased by up to a factor of 5 by long time plasma electrode activation, without adding Cs from Cs supply, by heating the collar to high temperature using hot air flow and plasma discharge. Without cracking or heating the cesium ampoule, but likely with Cs recovery from impurities, the achieved energy efficiency was comparable to that of conventionally cesiated SNS RF sources with an external or internal Cs supply. In the experiments, perfect cesiation was produced (without additional Cs supply) by the collection and trapping of traces of remnant cesium compounds from SPS surfaces.

  4. An inductively heated hot cavity catcher laser ion source

    SciTech Connect

    Reponen, M.; Moore, I. D. Pohjalainen, I.; Savonen, M.; Voss, A.; Rothe, S.; Sonnenschein, V.

    2015-12-15

    An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary {sup 107}Ag{sup 21+} ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z {sup 94}Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined.

  5. An inductively heated hot cavity catcher laser ion source.

    PubMed

    Reponen, M; Moore, I D; Pohjalainen, I; Rothe, S; Savonen, M; Sonnenschein, V; Voss, A

    2015-12-01

    An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary (107)Ag(21+) ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z (94)Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined. PMID:26724021

  6. An inductively heated hot cavity catcher laser ion source

    NASA Astrophysics Data System (ADS)

    Reponen, M.; Moore, I. D.; Pohjalainen, I.; Rothe, S.; Savonen, M.; Sonnenschein, V.; Voss, A.

    2015-12-01

    An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary 107Ag21+ ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z 94Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined.

  7. A Penning-assisted subkilovolt coaxial plasma source

    SciTech Connect

    Wang Zhehui; Beinke, Paul D.; Barnes, Cris W.; Martin, Michael W.; Mignardot, Edward; Wurden, Glen A.; Hsu, Scott C.; Intrator, Thomas P.; Munson, Carter P.

    2005-03-01

    A Penning-assisted 20 MW coaxial plasma source (plasma gun), which can achieve breakdown at sub-kV voltages, is described. The minimum breakdown voltage is about 400 V, significantly lower than previously reported values of 1-5 kV. The Penning region for electrons is created using a permanent magnet assembly, which is mounted to the inside of the cathode of the coaxial plasma source. A theoretical model for the breakdown is given. A 900 V 0.5 F capacitor bank supplies energy for gas breakdown and plasma sustainment from 4 to 6 ms duration. Typical peak gun current is about 100 kA and gun voltage between anode and cathode after breakdown is about 200 V. A circuit model is used to understand the current-voltage characteristics of the coaxial gun plasma. Energy deposited into the plasma accounts for about 60% of the total capacitor bank energy. This plasma source is uniquely suitable for studying multi-MW multi-ms plasmas with sub-MJ capacitor bank energy.

  8. Combined Gas-Liquid Plasma Source for Nanoparticle Synthesis

    NASA Astrophysics Data System (ADS)

    Burakov, V. S.; Kiris, V. V.; Nevar, A. A.; Nedelko, M. I.; Tarasenko, N. V.

    2016-09-01

    A gas-liquid plasma source for the synthesis of colloidal nanoparticles by spark erosion of the electrode material was developed and allowed the particle synthesis regime to be varied over a wide range. The source parameters were analyzed in detail for the electrical discharge conditions in water. The temperature, particle concentration, and pressure in the discharge plasma were estimated based on spectroscopic analysis of the plasma. It was found that the plasma parameters did not change signifi cantly if the condenser capacitance was increased from 5 to 20 nF. Purging the electrode gap with argon reduced substantially the pressure and particle concentration. Signifi cant amounts of water decomposition products in addition to electrode elements were found in the plasma in all discharge regimes. This favored the synthesis of oxide nanoparticles.

  9. Pulsed, atmospheric pressure plasma source for emission spectrometry

    DOEpatents

    Duan, Yixiang; Jin, Zhe; Su, Yongxuan

    2004-05-11

    A low-power, plasma source-based, portable molecular light emission generator/detector employing an atmospheric pressure pulsed-plasma for molecular fragmentation and excitation is described. The average power required for the operation of the plasma is between 0.02 W and 5 W. The features of the optical emission spectra obtained with the pulsed plasma source are significantly different from those obtained with direct current (dc) discharge higher power; for example, strong CH emission at 431.2 nm which is only weakly observed with dc plasma sources was observed, and the intense CN emission observed at 383-388 nm using dc plasma sources was weak in most cases. Strong CN emission was only observed using the present apparatus when compounds containing nitrogen, such as aniline were employed as samples. The present apparatus detects dimethylsulfoxide at 200 ppb using helium as the plasma gas by observing the emission band of the CH radical. When coupled with a gas chromatograph for separating components present in a sample to be analyzed, the present invention provides an apparatus for detecting the arrival of a particular component in the sample at the end of the chromatographic column and the identity thereof.

  10. Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

    SciTech Connect

    Jayapalan, Kanesh K.; Chin, Oi Hoong

    2015-04-24

    Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

  11. Synthesis of Ozone at Atmospheric Pressure by a Quenched Induction-Coupled Plasma Torch

    SciTech Connect

    A. Blutke; B.C. Stratton; D.R. Mikkelsen; J. Vavruska; R. Knight

    1998-01-01

    The technical feasibility of using an induction-coupled plasma (ICP) torch to synthesize ozone at atmospheric pressure is explored. Ozone concentrations up to ~250 ppm were produced using a thermal plasma reactor system based on an ICP torch operating at 2.5 MHz and ~11 kVA with an argon/oxygen mixture as the plasma-forming gas. A gaseous oxygen quench formed ozone by rapid mixing of molecular oxygen with atomic oxygen produced by the torch. The ozone concentration in the reaction chamber was measured by Fourier Transform infrared (FTIR) spectroscopy over a wide range of experimental configurations. The geometry of the quench gas flow, the quench flow velocity, and the quench flow rate played important roles in determining the ozone concentration. The ozone concentration was sensitive to the torch RF power, but was insensitive to the torch gas flow rates. These observations are interpreted within the framework of a simple model of ozone synthesis.

  12. Inductively Coupling Plasma (ICP) Treatment of Propylene (PP) Surface and Adhesion Improvement

    NASA Astrophysics Data System (ADS)

    Liu, Yenchun; Fu, Yenpei

    2009-12-01

    Study on increasing the roughness of the polymer substrate surface to enhance the adhesion with the copper layer in an inductively coupling plasma (ICP) process was carried out. The microstructure of the polymer substrate surfaces, which were exposed to different kinds of plasma treatment, was identified by scanning electron microscopy(SEM) analysis, peel strength of the copper coating and water surface contact angle. The adhesion of the substrate was largely enhanced by plasma treatment and the copper deposited coating reached a value of 7.68 kgf/m in verifying the adhesion of the copper coating with polymer material. The quality of the line/space 50/50 μm produced in the laboratory was examined by the pressure cooker test and proved to meet the requirement.

  13. A volume averaged global model for inductively coupled HBr/Ar plasma discharge

    NASA Astrophysics Data System (ADS)

    Chung, Sang-Young; Kwon, Deuk-Chul; Choi, Heechol; Song, Mi-Young

    2015-09-01

    A global model for inductively coupled HBr/Ar plasma was developed. The model was based on a self-consistent global model had been developed by Kwon et al., and a set of chemical reactions in the HBr/Ar plasma was compiled by surveying theoretical, experimental and evaluative researches. In this model vibrational excitations of bi-atomic molecules and electronic excitations of hydrogen atom were taken into account. Neutralizations by collisions between positive and negative ions were considered with Hakman's approximate formula achieved by fitting of theoretical result. For some reactions that were not supplied from literatures the reaction parameters of Cl2 and HCl were adopted as them Br2 and HBr, respectively. For validation calculation results using this model were compared with experimental results from literatures for various plasma discharge parameters and it showed overall good agreement.

  14. Callisto plasma interactions: Hybrid modeling including induction by a subsurface ocean

    NASA Astrophysics Data System (ADS)

    Lindkvist, Jesper; Holmström, Mats; Khurana, Krishan K.; Fatemi, Shahab; Barabash, Stas

    2015-06-01

    By using a hybrid plasma solver (ions as particles and electrons as a fluid), we have modeled the interaction between Callisto and Jupiter's magnetosphere for variable ambient plasma parameters. We compared the results with the magnetometer data from flybys (C3, C9, and C10) by the Galileo spacecraft. Modeling the interaction between Callisto and Jupiter's magnetosphere is important to establish the origin of the magnetic field perturbations observed by Galileo and thought to be related to a subsurface ocean. Using typical upstream magnetospheric plasma parameters and a magnetic dipole corresponding to the inductive response inside the moon, we show that the model results agree well with observations for the C3 and C9 flybys, but agrees poorly with the C10 flyby close to Callisto. The study does support the existence of a subsurface ocean at Callisto.

  15. Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

    NASA Technical Reports Server (NTRS)

    Hash, D. B.; Bose, D.; Rao, M. V. V. S.; Cruden, B. A.; Meyyappan, M.; Sharma, S. P.; Arnold, James O. (Technical Monitor)

    2000-01-01

    The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

  16. Alternative modeling methods for plasma-based Rf ion sources

    NASA Astrophysics Data System (ADS)

    Veitzer, Seth A.; Kundrapu, Madhusudhan; Stoltz, Peter H.; Beckwith, Kristian R. C.

    2016-02-01

    Rf-driven ion sources for accelerators and many industrial applications benefit from detailed numerical modeling and simulation of plasma characteristics. For instance, modeling of the Spallation Neutron Source (SNS) internal antenna H- source has indicated that a large plasma velocity is induced near bends in the antenna where structural failures are often observed. This could lead to improved designs and ion source performance based on simulation and modeling. However, there are significant separations of time and spatial scales inherent to Rf-driven plasma ion sources, which makes it difficult to model ion sources with explicit, kinetic Particle-In-Cell (PIC) simulation codes. In particular, if both electron and ion motions are to be explicitly modeled, then the simulation time step must be very small, and total simulation times must be large enough to capture the evolution of the plasma ions, as well as extending over many Rf periods. Additional physics processes such as plasma chemistry and surface effects such as secondary electron emission increase the computational requirements in such a way that even fully parallel explicit PIC models cannot be used. One alternative method is to develop fluid-based codes coupled with electromagnetics in order to model ion sources. Time-domain fluid models can simulate plasma evolution, plasma chemistry, and surface physics models with reasonable computational resources by not explicitly resolving electron motions, which thereby leads to an increase in the time step. This is achieved by solving fluid motions coupled with electromagnetics using reduced-physics models, such as single-temperature magnetohydrodynamics (MHD), extended, gas dynamic, and Hall MHD, and two-fluid MHD models. We show recent results on modeling the internal antenna H- ion source for the SNS at Oak Ridge National Laboratory using the fluid plasma modeling code USim. We compare demonstrate plasma temperature equilibration in two-temperature MHD models

  17. Alternative modeling methods for plasma-based Rf ion sources.

    PubMed

    Veitzer, Seth A; Kundrapu, Madhusudhan; Stoltz, Peter H; Beckwith, Kristian R C

    2016-02-01

    Rf-driven ion sources for accelerators and many industrial applications benefit from detailed numerical modeling and simulation of plasma characteristics. For instance, modeling of the Spallation Neutron Source (SNS) internal antenna H(-) source has indicated that a large plasma velocity is induced near bends in the antenna where structural failures are often observed. This could lead to improved designs and ion source performance based on simulation and modeling. However, there are significant separations of time and spatial scales inherent to Rf-driven plasma ion sources, which makes it difficult to model ion sources with explicit, kinetic Particle-In-Cell (PIC) simulation codes. In particular, if both electron and ion motions are to be explicitly modeled, then the simulation time step must be very small, and total simulation times must be large enough to capture the evolution of the plasma ions, as well as extending over many Rf periods. Additional physics processes such as plasma chemistry and surface effects such as secondary electron emission increase the computational requirements in such a way that even fully parallel explicit PIC models cannot be used. One alternative method is to develop fluid-based codes coupled with electromagnetics in order to model ion sources. Time-domain fluid models can simulate plasma evolution, plasma chemistry, and surface physics models with reasonable computational resources by not explicitly resolving electron motions, which thereby leads to an increase in the time step. This is achieved by solving fluid motions coupled with electromagnetics using reduced-physics models, such as single-temperature magnetohydrodynamics (MHD), extended, gas dynamic, and Hall MHD, and two-fluid MHD models. We show recent results on modeling the internal antenna H(-) ion source for the SNS at Oak Ridge National Laboratory using the fluid plasma modeling code USim. We compare demonstrate plasma temperature equilibration in two-temperature MHD

  18. Identification of Neutral Particle Sources in MST Plasmas

    NASA Astrophysics Data System (ADS)

    Norval, Ryan; Munaretto, Stefano; Goetz, John; Schmitz, Oliver

    2015-11-01

    The plasma wall interaction (PWI) in the MST RFP has yet to be studied systematically to determine the effects of the edge plasma on overall plasma performance. Two imaging views of the MST plasma currently exist. The first views the outboard toroidal and poloidal belt limiters at the main poloidal gap limiter. The second views the inboard poloidal limiter, as well as a section of the outboard toroidal limiter away from the man gap limiter. Data from viewing outboard limiters reveals PWI structures correlate with the plasma conditions. In standard RFP plasmas at lower plasma currents the PWI is dominated by non-axisymmetric radiation belts. As the RFP plasma current rises, increasing axisymmetry is seen from the edge. When in the 3D equilibria of the quasi-single helicity (QSH) state the PWI correlates with the main magnetic mode of the plasma. The dominant source of light observed from the MST edge is from hydrogen recycling. This will be used to inform neutral particle sourcing in the EIRENE neutral transport code. EIRENE will be used to compare how variations in fueling could affect the neutral profile in MST. This work is supported by the U.S. Department of Energy.

  19. Arc initiation in cathodic arc plasma sources

    DOEpatents

    Anders, Andre

    2002-01-01

    A "triggerless" arc initiation method and apparatus is based on simply switching the arc supply voltage to the electrodes (anode and cathode). Neither a mechanical trigger electrode nor a high voltage flashover from a trigger electrode is required. A conducting path between the anode and cathode is provided, which allows a hot spot to form at a location where the path connects to the cathode. While the conductive path is eroded by the cathode spot action, plasma deposition ensures the ongoing repair of the conducting path. Arc initiation is achieved by simply applying the relatively low voltage of the arc power supply, e.g. 500 V-1 kV, with the insulator between the anode and cathode coated with a conducting layer and the current at the layer-cathode interface concentrated at one or a few contact points. The local power density at these contact points is sufficient for plasma production and thus arc initiation. A conductive surface layer, such as graphite or the material being deposited, is formed on the surface of the insulator which separates the cathode from the anode. The mechanism of plasma production (and arc initiation) is based on explosive destruction of the layer-cathode interface caused by joule heating. The current flow between the thin insulator coating and cathode occurs at only a few contact points so the current density is high.

  20. Plasma sterilization of Geobacillus Stearothermophilus by O{mathsf2}:N{mathsf2} RF inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Kylián, O.; Sasaki, T.; Rossi, F.

    2006-05-01

    The aim of this work is to identify the main process responsible for sterilization of Geobacillus Stearothermophilus spores in O{2}:N{2} RF inductively coupled plasma. In order to meet this objective the sterilization efficiencies of discharges in mixtures differing in the initial O{2}/N{2} ratios are compared with plasma properties and with scanning electron microscopy images of treated spores. According to the obtained results it can be concluded that under our experimental conditions the time needed to reach complete sterilization is more related to O atom density than UV radiation intensity, i.e. complete sterilization is not related only to DNA damage as in UV sterilization but more likely to the etching of the spore.

  1. Inelastic collisional deactivation in plasma-related non-spectroscopic matrix interferences in inductively coupled plasma atomic emission spectrometry

    NASA Astrophysics Data System (ADS)

    Al-Ammar, Assad S.; Barnes, Ramon M.

    1999-07-01

    Inelastic collisional deactivation of the analyte excited state is demonstrated as a dominant cause for non-spectroscopic matrix interference in inductively coupled plasma atomic emission spectrometry (ICP-AES) for commonly used plasma operating conditions in routine analysis. A mathematical simulation of the inelastic collisional model was examined. Comparison between the theoretical model and experimental results using atomic and ionic lines of the analytes Zn, Ba, Mg, Mn and Sr validates the inelastic collisional deactivation model as a dominant cause for non-spectroscopic matrix effect. Matrices evaluated were NH 4Cl, NH 4SCN, (NH 4) 2SO 4, and H 2SO 4 to represent difficult-to-ionize matrices (DIE) and NaCl and CaCl 2 to represent easy-to-ionize element matrices (EIE).

  2. Development of a long-slot microwave plasma source

    NASA Astrophysics Data System (ADS)

    Kuwata, Y.; Kasuya, T.; Miyamoto, N.; Wada, M.

    2016-02-01

    A 20 cm long 10 cm wide microwave plasma source was realized by inserting two 20 cm long 1.5 mm diameter rod antennas into the plasma. Plasma luminous distributions around the antennas were changed by magnetic field arrangement created by permanent magnets attached to the source. The distributions appeared homogeneous in one direction along the antenna when the spacing between the antenna and the source wall was 7.5 mm for the input microwave frequency of 2.45 GHz. Plasma density and temperature at a plane 20 cm downstream from the microwave shield were measured by a Langmuir probe array at 150 W microwave power input. The measured electron density and temperature varied over space from 3.0 × 109 cm-3 to 5.8 × 109 cm-3, and from 1.1 eV to 2.1 eV, respectively.

  3. Development of a long-slot microwave plasma source.

    PubMed

    Kuwata, Y; Kasuya, T; Miyamoto, N; Wada, M

    2016-02-01

    A 20 cm long 10 cm wide microwave plasma source was realized by inserting two 20 cm long 1.5 mm diameter rod antennas into the plasma. Plasma luminous distributions around the antennas were changed by magnetic field arrangement created by permanent magnets attached to the source. The distributions appeared homogeneous in one direction along the antenna when the spacing between the antenna and the source wall was 7.5 mm for the input microwave frequency of 2.45 GHz. Plasma density and temperature at a plane 20 cm downstream from the microwave shield were measured by a Langmuir probe array at 150 W microwave power input. The measured electron density and temperature varied over space from 3.0 × 10(9) cm(-3) to 5.8 × 10(9) cm(-3), and from 1.1 eV to 2.1 eV, respectively. PMID:26932114

  4. On anomalous temporal evolution of gas pressure in inductively coupled plasma

    SciTech Connect

    Seo, B. H.; Chang, H. Y.; You, S. J.; Kim, J. H.; Seong, D. J.

    2013-04-01

    The temporal measurement of gas pressure in inductive coupled plasma revealed that there is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition and extinction: a sudden gas pressure change and its relaxation of which time scales are about a few seconds and a few tens of second, respectively, were observed after plasma ignition and extinction. This phenomenon can be understood as a combined result between the neutral heating effect induced by plasma and the pressure relaxation effect for new gas temperature. The temporal measurement of gas temperature by laser Rayleigh scattering and the time dependant calculations for the neutral heating and pressure relaxation are in good agreement with our experimental results. This result and physics behind are expected to provide a new operational perspective of the recent plasma processes of which time is very short, such as a plasma enhanced atomic layer deposition/etching, a soft etch for disposal of residual by-products on wafer, and light oxidation process in semiconductor manufacturing.

  5. Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime

    NASA Astrophysics Data System (ADS)

    Wang, Jun-Chieh; Kenney, Jason; Agarwal, Ankur; Nichols, Michael; Rogers, James; Rauf, Shahid

    2015-09-01

    Inductively coupled plasmas (ICP) are widely used in the microelectronic industry for thin film etching. ICPs have typically been operated at low gas pressures (<50 mTorr) and they have been well-characterized in this regime. Several applications requiring high etch rates (e.g., vertical NAND etch) have recently extended the use of ICPs to the high power (>4000 W) and high pressure (>100 mTorr) regime. ICP operation in this high-power, high-pressure regime imposes a tremendous challenge of achieving good plasma uniformity over large substrates. This necessitates a good theoretical understanding of the underlying physics, thorough experimental characterization, and more accurate numerical models for hardware design guidance. In this study, we will focus on the characterization of ICP in the high-power, high-pressure regime. Computational modeling is done using CRTRS, our in-house 2D/3D plasma model. The fluid plasma model is coupled to a circuit model to self-consistently account for the capacitive coupling from the coils that is expected to dominate in this operating regime. Properties of Ar plasma will be discussed and compared with experiments. The impact of critical operating parameters such as ICP power, pressure, flow rate, and current ratio (in multi-coil antenna structures) on plasma characteristics will be examined. Results in relevant processing gases will also be discussed.

  6. Transport and trapping of dust particles in a potential well created by inductively coupled diffused plasmas.

    PubMed

    Choudhary, Mangilal; Mukherjee, S; Bandyopadhyay, P

    2016-05-01

    A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented.

  7. Transport and trapping of dust particles in a potential well created by inductively coupled diffused plasmas

    NASA Astrophysics Data System (ADS)

    Choudhary, Mangilal; Mukherjee, S.; Bandyopadhyay, P.

    2016-05-01

    A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented.

  8. Transport and trapping of dust particles in a potential well created by inductively coupled diffused plasmas.

    PubMed

    Choudhary, Mangilal; Mukherjee, S; Bandyopadhyay, P

    2016-05-01

    A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented. PMID:27250421

  9. Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil

    SciTech Connect

    Arancibia Monreal, J.; Chabert, P.; Godyak, V.

    2013-10-15

    The effect of magnetic filtering on the electron energy distribution function is studied in an inductive discharge with internal coil coupling. The coil is placed inside the plasma and driven by a low-frequency power supply (5.8 MHz) which leads to a very high power transfer efficiency. A permanent dipole magnet may be placed inside the internal coil to produce a static magnetic field around 100 Gauss. The coil and the matching system are designed to minimize the capacitive coupling to the plasma. Capacitive coupling is quantified by measuring the radiofrequency (rf) plasma potential with a capacitive probe. Without the permanent magnet, the rf plasma potential is significantly smaller than the electron temperature. When the magnet is present, the rf plasma potential increases. The electron energy distribution function is measured as a function of space with and without the permanent magnet. When the magnet is present, electrons are cooled down to low temperature in the downstream region. This region of low electron temperature may be useful for plasma processing applications, as well as for efficient negative ion production.

  10. Reduced electron temperature in a magnetized inductively-coupled plasma with internal coil

    NASA Astrophysics Data System (ADS)

    Arancibia Monreal, J.; Chabert, P.; Godyak, V.

    2013-10-01

    The effect of magnetic filtering on the electron energy distribution function is studied in an inductive discharge with internal coil coupling. The coil is placed inside the plasma and driven by a low-frequency power supply (5.8 MHz) which leads to a very high power transfer efficiency. A permanent dipole magnet may be placed inside the internal coil to produce a static magnetic field around 100 Gauss. The coil and the matching system are designed to minimize the capacitive coupling to the plasma. Capacitive coupling is quantified by measuring the radiofrequency (rf) plasma potential with a capacitive probe. Without the permanent magnet, the rf plasma potential is significantly smaller than the electron temperature. When the magnet is present, the rf plasma potential increases. The electron energy distribution function is measured as a function of space with and without the permanent magnet. When the magnet is present, electrons are cooled down to low temperature in the downstream region. This region of low electron temperature may be useful for plasma processing applications, as well as for efficient negative ion production.

  11. Langmuir Probe Distortions and Probe Compensation in an Inductively Coupled Plasma

    NASA Technical Reports Server (NTRS)

    Ji, J. S.; Cappelli, M. A.; Kim, J. S.; Rao, M. V. V. S.; Sharma, S. P.

    1999-01-01

    In many RF discharges, Langmuir probe measurements are usually made against a background of sinusoidal (and not so sinusoidal) fluctuations in the plasma parameters such as the plasma potential (Vp), the electron number density (ne), and the electron temperature (Te). The compensation of sinusoidal fluctuations in Vp has been extensively studied and is relatively well understood. Less attention has been paid to the possible distortions introduced by small fluctuations in plasma density and/or plasma temperature, which may arise in the sheath and pre-sheath regions of RF discharges. Here, we present the results of a model simulation of probe characteristics subject to fluctuations in both Vp and ne. The modeling of probe distortion due to possible fluctuations in Te is less straightforward. A comparison is presented of calculations with experimental measurements using a compensated and uncompensated Langmuir probe in an inductively coupled GEC reference cell plasma, operating on Ar and Ar/CF4 mixtures. The plasma parameters determined from the compensated probe characteristics are compared to previous measurements of others made in similar discharges, and to our own measurements of the average electron density derived from electrical impedance measurements.

  12. Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Meyyappan, M.; Sharma, S. P.

    2000-01-01

    Fluorocarbon gases, such as CF4, and their mixtures are widely used in contemporary low-pressure and high-density plasma processing techniques. In such plasmas Langmuir probe is one of the most commonly employed diagnostic techniques to obtain electron number density (ne), electron temperature (Te), electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp). In this paper we report probe data for planar inductively coupled plasmas in CF4/O2/Ar mixtures. By varying the relative concentrations in the mixture, radial profiles of ne, ni, Te, Ee, Vp, EEDF were measured in the mid-plane of the plasma at 10 mTorr and 20 mTorr of gas pressures, and 200 W and 300 W of RF powers. Data show that ne and ni decrease with increase of CF4 content and decrease of gas-pressure but they increase with increase of RF-power, whereas Vp increases with decrease of gas-pressure and remains independent of RF-power. However, they all peak at the center of the plasma and decrease towards the edge while Te follows the other way and increases a little with increase of power. The measured EEDFs exhibit Druyvesteyn-like distribution at all pressures and powers. Data are analyzed and will be presented.

  13. Jovian Plasmas Torus Interaction with Europa. Plasma Wake Structure and Effect of Inductive Magnetic Field: 3D Hybrid Kinetic Simulation

    NASA Technical Reports Server (NTRS)

    Lipatov, A. S.; Cooper, J F.; Paterson, W. R.; Sittler, E. C., Jr.; Hartle, R. E.; Simpson, David G.

    2013-01-01

    The hybrid kinetic model supports comprehensive simulation of the interaction between different spatial and energetic elements of the Europa moon-magnetosphere system with respect to a variable upstream magnetic field and flux or density distributions of plasma and energetic ions, electrons, and neutral atoms. This capability is critical for improving the interpretation of the existing Europa flyby measurements from the Galileo Orbiter mission, and for planning flyby and orbital measurements (including the surface and atmospheric compositions) for future missions. The simulations are based on recent models of the atmosphere of Europa (Cassidy et al., 2007; Shematovich et al., 2005). In contrast to previous approaches with MHD simulations, the hybrid model allows us to fully take into account the finite gyroradius effect and electron pressure, and to correctly estimate the ion velocity distribution and the fluxes along the magnetic field (assuming an initial Maxwellian velocity distribution for upstream background ions). Photoionization, electron-impact ionization, charge exchange and collisions between the ions and neutrals are also included in our model. We consider the models with Oþ þ and Sþ þ background plasma, and various betas for background ions and electrons, and pickup electrons. The majority of O2 atmosphere is thermal with an extended non-thermal population (Cassidy et al., 2007). In this paper, we discuss two tasks: (1) the plasma wake structure dependence on the parameters of the upstream plasma and Europa's atmosphere (model I, cases (a) and (b) with a homogeneous Jovian magnetosphere field, an inductive magnetic dipole and high oceanic shell conductivity); and (2) estimation of the possible effect of an induced magnetic field arising from oceanic shell conductivity. This effect was estimated based on the difference between the observed and modeled magnetic fields (model II, case (c) with an inhomogeneous Jovian magnetosphere field, an inductive

  14. Radionuclide determination in environmental samples by inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Lariviere, Dominic; Taylor, Vivien F.; Evans, R. Douglas; Cornett, R. Jack

    2006-08-01

    The determination of naturally occurring and anthropogenic radionuclides in the environment by inductively coupled plasma mass spectrometry has gained recognition over the last fifteen years, relative to radiometric techniques, as the result of improvement in instrumental performance, sample introduction equipment, and sample preparation. With the increase in instrumental sensitivity, it is now possible to measure ultratrace levels (fg range) of many radioisotopes, including those with half-lives between 1 and 1000 years, without requiring very complex sample pre-concentration schemes. However, the identification and quantification of radioisotopes in environmental matrices is still hampered by a variety of analytical issues such as spectral (both atomic and molecular ions) and non-spectral (matrix effect) interferences and instrumental limitations (e.g., abundance sensitivity). The scope of this review is to highlight recent analytical progress and issues associated with the determination of radionuclides by inductively coupled plasma mass spectrometry. The impact of interferences, instrumental limitations (e.g., degree of ionization, abundance sensitivity, detection limits) and low sample-to-plasma transfer efficiency on the measurement of radionuclides by inductively coupled plasma mass spectrometry will be described. Solutions that overcome these issues will be discussed, highlighting their pros and cons and assessing their impact on the measurement of environmental radioactivity. Among the solutions proposed, mass and chemical resolution through the use of sector-field instruments and chemical reactions/collisions in a pressurized cell, respectively, will be described. Other methods, such as unique sample introduction equipment (e.g., laser ablation, electrothermal vaporisation, high efficiency nebulization) and instrumental modifications/optimizations (e.g., instrumental vacuum, radiofrequency power, guard electrode) that improve sensitivity and performance

  15. Operation of the Proto-MPEX High Intensity Plasma Source

    NASA Astrophysics Data System (ADS)

    Caughman, J. B. O.; Goulding, R. H.; Biewer, T. M.; Bigelow, T. S.; Campbell, I. H.; Diem, S. J.; Martin, E. H.; Pesavento, P. V.; Rapp, J.; Ray, H. B.; Shaw, G. C.; Showers, M. A.; Luo, G.-N.

    2015-11-01

    The Prototype Materials Plasma Experiment (Proto-MPEX) is a linear high-intensity rf plasma source that combines a high-density helicon plasma generator with electron and ion heating sections. It is being used to study the physics of heating over-dense plasmas in a linear configuration. The helicon plasma is produced by coupling 13.56 MHz rf power at levels up to 100 kW. Microwaves at 28 GHz (~ 150 kW) are coupled to the electrons in the over-dense helicon plasma via Electron Bernstein Waves (EBW). Ion cyclotron heating (~ 30 kW) will be via a magnetic beach approach. Plasma diagnostics include Thomson Scattering and a retarding field energy analyzer near the target, while a microwave interferometer and double-Langmuir probes are used to determine plasma parameters elsewhere in the system. Filterscopes are being used to measure D-alpha emission and He line ratios at multiple locations, and IR cameras image the target plates to determine heat deposition. High plasma densities in the helicon region have been produced in He (>3x1019/m3) and D (>1.5x1019/m3) , and operation with on-axis magnetic field strength >1 T has been demonstrated. Details of the experimental results and future plans for studying plasma surface/RF antenna interactions will be presented. ORNL is managed by UT-Battelle, LLC, for the U.S. DOE under contract DE-AC-05-00OR22725.

  16. Extreme Ultraviolet Light Emission from Z-Pinch Discharge Plasma Source

    NASA Astrophysics Data System (ADS)

    Watanabe, Masato; Song, Inho; Sakamoto, Toshiro; Kobayashi, Yasunori; Okino, Akitoshi; Mohanty, Smruti R.; Horioka, Kazuhiko; Hotta, Eiki

    2006-01-01

    A capillary Z-pinch discharge light source for EUV lithography has been developed. Our device is equipped with a water-cooled ceramic capillary and electrodes, and a solid state pulsed power generator. A stacked static induction thyristors are used as switching elements, which enable high repetition rate operation of pulsed power supply. A magnetic switch is connected in series, which not only assists the semiconductor switch but also provides a preionization current. In the present study, EUV radiation emitted from pinching plasma in a xenon-filled capillary was quantitatively measured using an in-band calorimeter. Time-integrated in-band source image was also observed using a pinhole camera system. Furthermore, new electrode system using plasma jet has been developed.

  17. Immediate Influence of External Sources on Turbulent Plasma Transport

    NASA Astrophysics Data System (ADS)

    Kosuga, Yusuke; Itoh, Sanae-I.; Itoh, Kimitaka

    Immediate impact of external sources on pressure-gradient-driven turbulence and turbulent transport (without waiting the evolution of global parameters and those in mean velocity distribution function) is discussed. The case, where an external source directly couples with plasma fluctuations in particle source and momentum source, is investigated. Theoretical analysis is developed by use of Hasegawa-Wakatani model equations. It is shown that the momentum source can induce the immediate influence on the turbulence and turbulent transport. The effect of this coupling between source and fluctuations on the momentum theorem is also explained.

  18. Imploding plasma radiation sources: basic concepts. Memorandum report

    SciTech Connect

    Guillory, J.; Davis, J.

    1984-07-31

    This document is prepared as a briefing aid and technical primer for persons unfamiliar and uninitiated with the theory of imploding plasma radiation sources. It is hoped that it will prove helpful in introducing the basic physics concepts of these sources and in presenting these concepts to newcomers and potential users.

  19. Aluminium content of some processed foods, raw materials and food additives in China by inductively coupled plasma-mass spectrometry.

    PubMed

    Deng, Gui-Fang; Li, Ke; Ma, Jing; Liu, Fen; Dai, Jing-Jing; Li, Hua-Bin

    2011-01-01

    The level of aluminium in 178 processed food samples from Shenzhen city in China was evaluated using inductively coupled plasma-mass spectrometry. Some processed foods contained a concentration of up to 1226 mg/kg, which is about 12 times the Chinese food standard. To establish the main source in these foods, Al levels in the raw materials were determined. However, aluminium concentrations in raw materials were low (0.10-451.5 mg/kg). Therefore, aluminium levels in food additives used in these foods was determined and it was found that some food additives contained a high concentration of aluminium (0.005-57.4 g/kg). The results suggested that, in the interest of public health, food additives containing high concentrations of aluminium should be replaced by those containing less. This study has provided new information on aluminium levels in Chinese processed foods, raw materials and a selection of food additives.

  20. Inductively Coupled Plasma Etching of III-Nitrides in Cl(2)/Xe,Cl(2)/Ar and Cl(2)/He

    SciTech Connect

    Abernathy, C.R.; Cho, H.; Donovan, S.M.; Hahn, Y.B.; Hays, D.C.; Jung, K.B.; Pearton, S.J.; Shul, R.J.

    1999-01-05

    The role of additive noble gases He, Ar and Xe to C&based Inductively Coupled Plasmas for etching of GaN, AIN and InN were examined. The etch rates were a strong function of chlorine concentration, rf chuck power and ICP source power. The highest etch rates for InN were obtained with C12/Xe, while the highest rates for AIN and GaN were obtained with C12/He. Efficient breaking of the 111-nitrogen bond is crucial for attaining high etch rates. The InN etching was dominated by physical sputtering, in contrast to GaN and AIN. In the latter cases, the etch rates were limited by initial breaking of the III-nitrogen bond. Maximum selectivities of -80 for InN to GaN and InN to AIN were obtained.

  1. Etch Characteristics of GaN using Inductively Coupled Cl{sub 2} Plasma Etching

    SciTech Connect

    Rosli, Siti Azlina; Aziz, A. Abdul

    2008-05-20

    In this study, the plasma characteristics and GaN etch properties of inductively coupled Cl{sub 2}/Ar plasmas were investigated. It has shown that the results of a study of inductively coupled plasma (ICP) etching of gallium nitride by using Cl{sub 2}/Ar is possible to meet the requirement (anisotropy, high etch rate and high selectivity), simultaneously. We have investigated the etching rate dependency on the percentage of Argon in the gas mixture, the total pressure and DC voltage. We found that using a gas mixture with 20 sccm of Ar, the optimum etch rate of GaN was achieved. The etch rate were found to increase with voltage, attaining a maximum rate 2500 A/min at -557 V. The addition of an inert gas, Ar is found to barely affect the etch rate. Surface morphology of the etched samples was verified by scanning electron microscopy and atomic force microscopy. It was found that the etched surface was anisotropic and the smoothness of the etched surface is comparable to that of polished wafer.

  2. Determination of trace elements in petroleum products by inductively coupled plasma techniques: A critical review

    NASA Astrophysics Data System (ADS)

    Sánchez, Raquel; Todolí, José Luis; Lienemann, Charles-Philippe; Mermet, Jean-Michel

    2013-10-01

    The fundamentals, applications and latter developments of petroleum products analysis through inductively coupled plasma optical emission spectrometry (ICP-OES) and mass spectrometry (ICP-MS) are revisited in the present bibliographic survey. Sample preparation procedures for the direct analysis of fuels by using liquid sample introduction systems are critically reviewed and compared. The most employed methods are sample dilution, emulsion or micro-emulsion preparation and sample decomposition. The first one is the most widely employed due to its simplicity. Once the sample has been prepared, an organic matrix is usually present. The performance of the sample introduction system (i.e., nebulizer and spray chamber) depends strongly upon the nature and properties of the solution finally obtained. Many different devices have been assayed and the obtained results are shown. Additionally, samples can be introduced into the plasma by using an electrothermal vaporization (ETV) device or a laser ablation system (LA). The recent results published in the literature showing the feasibility, advantages and drawbacks of latter alternatives are also described. Therefore, the main goal of the review is the discussion of the different approaches developed for the analysis of crude oil and its derivates by inductively coupled plasma (ICP) techniques.

  3. Sterilization of beehive material with a double inductively coupled low pressure plasma

    NASA Astrophysics Data System (ADS)

    Priehn, M.; Denis, B.; Aumeier, P.; Kirchner, W. H.; Awakowicz, P.; Leichert, L. I.

    2016-09-01

    American Foulbrood is a severe, notifiable disease of the honey bee. It is caused by infection of bee larvae with spores of the gram-positive bacterium Paenibacillus larvae. Spores of this organism are found in high numbers in an infected hive and are highly resistant to physical and chemical inactivation methods. The procedures to rehabilitate affected apiaries often result in the destruction of beehive material. In this study we assess the suitability of a double inductively coupled low pressure plasma as a non-destructive, yet effective alternative inactivation method for bacterial spores of the model organism Bacillus subtilis on beehive material. Plasma treatment was able to effectively remove spores from wax, which, under protocols currently established in veterinary practice, normally is destroyed by ignition or autoclaved for sterilization. Spores were removed from wooden surfaces with efficacies significantly higher than methods currently used in veterinary practice, such as scorching by flame treatment. In addition, we were able to non-destructively remove spores from the highly delicate honeycomb wax structures, potentially making treatment of beehive material with double inductively coupled low pressure plasma part of a fast and reliable method to rehabilitate infected bee colonies with the potential to re-use honeycombs.

  4. Numerical Modeling and Testing of an Inductively-Driven and High-Energy Pulsed Plasma Thrusters

    NASA Technical Reports Server (NTRS)

    Parma, Brian

    2004-01-01

    Pulsed Plasma Thrusters (PPTs) are advanced electric space propulsion devices that are characterized by simplicity and robustness. They suffer, however, from low thrust efficiencies. This summer, two approaches to improve the thrust efficiency of PPTs will be investigated through both numerical modeling and experimental testing. The first approach, an inductively-driven PPT, uses a double-ignition circuit to fire two PPTs in succession. This effectively changes the PPTs configuration from an LRC circuit to an LR circuit. The LR circuit is expected to provide better impedance matching and improving the efficiency of the energy transfer to the plasma. An added benefit of the LR circuit is an exponential decay of the current, whereas a traditional PPT s under damped LRC circuit experiences the characteristic "ringing" of its current. The exponential decay may provide improved lifetime and sustained electromagnetic acceleration. The second approach, a high-energy PPT, is a traditional PPT with a variable size capacitor bank. This PPT will be simulated and tested at energy levels between 100 and 450 joules in order to investigate the relationship between efficiency and energy level. Arbitrary Coordinate Hydromagnetic (MACH2) code is used. The MACH2 code, designed by the Center for Plasma Theory and Computation at the Air Force Research Laboratory, has been used to gain insight into a variety of plasma problems, including electric plasma thrusters. The goals for this summer include numerical predictions of performance for both the inductively-driven PPT and high-energy PFT, experimental validation of the numerical models, and numerical optimization of the designs. These goals will be met through numerical and experimental investigation of the PPTs current waveforms, mass loss (or ablation), and impulse bit characteristics.

  5. Inductive pulsed plasma thruster model with time-evolution of energy and state properties

    NASA Astrophysics Data System (ADS)

    Polzin, K. A.; Sankaran, K.; Ritchie, A. G.; Reneau, J. P.

    2013-11-01

    A model for pulsed inductive plasma acceleration is presented that consists of a set of circuit equations coupled to both a one-dimensional (1D) equation of motion and an equation governing the partitioning of energy. The latter two equations are obtained for the plasma current sheet by treating it as a single element of finite volume and integrating the governing equations over that volume. The integrated terms are replaced where necessary by physically equivalent approximations that are calculated through the solution of other parts of the governing equation set. The model improves upon previous 1D performance models by permitting the time-evolution of the temperature consistent with the time-varying energy flux into the plasma. The plasma state properties are also more realistically modelled and evolved in time, allowing for the tailoring of the model to different gases that may be chosen as propellants. Computational results for argon propellant are presented to demonstrate the efficacy of the model. The model produces a result where efficiency is maximized at a given value of the electrodynamic scaling term known as the dynamic impedance parameter. The scaling of different energy sinks as a function of the dynamic impedance parameter provides insight into the global energy partitioning in these types of accelerators. Results from the present model deviate from the previous version where temperature is selected as an input without regard for the energy that would be deposited to heat the gas to that temperature. Qualitatively and quantitatively, the model predicts specific impulse values that compare favourably with those measured for two separate inductive pulsed plasma thrusters. Efficiency is underpredicted in the regime where data are available, but the trends in the data and simulations follow similar trajectories that appear to be converging towards a predicted peak efficiency as the dynamic impedance parameter is increased.

  6. A pulsed xenon megawatt arc plasma source

    NASA Technical Reports Server (NTRS)

    Michels, C. J.

    1973-01-01

    The exhaust of the source flowing into vacuum was measured by Thomson scattering diagnosis. Mean electron temperatures and densities were found to be 4-8 eV and of order ten to the 13th power cm/3 respectively over the 8 cm exhaust diameter at 30 cm from the source. Large shot to shot variations were noted. After a transient spike passes, these conditions persist during the power time of 125 microsecond. These exhaust conditions are marginal for evaluation of a proposed near resonant charge exchange pumped laser theory.

  7. Investigations into the origins of polyatomic ions in inductively coupled plasma-mass spectrometry

    SciTech Connect

    McIntyre, Sally M.

    2010-01-01

    An inductively coupled plasma-mass spectrometer (ICP-MS) is an elemental analytical instrument capable of determining nearly all elements in the periodic table at limits of detection in the parts per quadrillion and with a linear analytical range over 8-10 orders of magnitude. Three concentric quartz tubes make up the plasma torch. Argon gas is spiraled through the outer tube and generates the plasma powered by a looped load coil operating at 27.1 or 40.6 MHz. The argon flow of the middle channel is used to keep the plasma above the innermost tube through which solid or aqueous sample is carried in a third argon stream. A sample is progressively desolvated, atomized and ionized. The torch is operated at atmospheric pressure. To reach the reduced pressures of mass spectrometers, ions are extracted through a series of two, approximately one millimeter wide, circular apertures set in water cooled metal cones. The space between the cones is evacuated to approximately one torr. The space behind the second cone is pumped down to, or near to, the pressure needed for the mass spectrometer (MS). The first cone, called the sampler, is placed directly in the plasma plume and its position is adjusted to the point where atomic ions are most abundant. The hot plasma gas expands through the sampler orifice and in this expansion is placed the second cone, called the skimmer. After the skimmer traditional MS designs are employed, i.e. quadrupoles, magnetic sectors, time-of-flight. ICP-MS is the leading trace element analysis technique. One of its weaknesses are polyatomic ions. This dissertation has added to the fundamental understanding of some of these polyatomic ions, their origins and behavior. Although mainly continuing the work of others, certain novel approaches have been introduced here. Chapter 2 includes the first reported efforts to include high temperature corrections to the partition functions of the polyatomic ions in ICP-MS. This and other objections to preceeding

  8. Nitrogen Gas Plasma Generated by a Static Induction Thyristor as a Pulsed Power Supply Inactivates Adenovirus

    PubMed Central

    Sakudo, Akikazu; Toyokawa, Yoichi; Imanishi, Yuichiro

    2016-01-01

    Adenovirus is one of the most important causative agents of iatrogenic infections derived from contaminated medical devices or finger contact. In this study, we investigated whether nitrogen gas plasma, generated by applying a short high-voltage pulse to nitrogen using a static induction thyristor power supply (1.5 kilo pulse per second), exhibited a virucidal effect against adenoviruses. Viral titer was reduced by one log within 0.94 min. Results from detection of viral capsid proteins, hexon and penton, by Western blotting and immunochromatography were unaffected by the plasma treatment. In contrast, analysis using the polymerase chain reaction suggested that plasma treatment damages the viral genomic DNA. Reactive chemical products (hydrogen peroxide, nitrate, and nitrite), ultraviolet light (UV-A) and slight temperature elevations were observed during the operation of the gas plasma device. Viral titer versus intensity of each potential virucidal factor were used to identify the primary mechanism of disinfection of adenovirus. Although exposure to equivalent levels of UV-A or heat treatment did not inactivate adenovirus, treatment with a relatively low concentration of hydrogen peroxide efficiently inactivated the virus. Our results suggest the nitrogen gas plasma generates reactive chemical products that inactivate adenovirus by damaging the viral genomic DNA. PMID:27322066

  9. A control-oriented self-consistent model of an inductively-coupled plasma

    NASA Astrophysics Data System (ADS)

    Keville, Bernard; Turner, Miles

    2009-10-01

    An essential first step in the design of real time control algorithms for plasma processes is to determine dynamical relationships between actuator quantities such as gas flow rate set points and plasma states such electron density. An ideal first principles-based, control-oriented model should exhibit the simplicity and computational requirements of an empirical model and, in addition, despite sacrificing first principles detail, capture enough of the essential physics and chemistry of the process in order to provide reasonably accurate qualitative predictions. This presentation describes a control-oriented model of a cylindrical low pressure planar inductive discharge with a stove top antenna. The model consists of equivalent circuit coupled to a global model of the plasma chemistry to produce a self-consistent zero-dimensional model of the discharge. The non-local plasma conductivity and the fields in the plasma are determined from the wave equation and the two-term solution of the Boltzmann equation. Expressions for the antenna impedance and the parameters of the transformer equivalent circuit in terms of the isotropic electron distribution and the geometry of the chamber are presented.

  10. Nitrogen Gas Plasma Generated by a Static Induction Thyristor as a Pulsed Power Supply Inactivates Adenovirus.

    PubMed

    Sakudo, Akikazu; Toyokawa, Yoichi; Imanishi, Yuichiro

    2016-01-01

    Adenovirus is one of the most important causative agents of iatrogenic infections derived from contaminated medical devices or finger contact. In this study, we investigated whether nitrogen gas plasma, generated by applying a short high-voltage pulse to nitrogen using a static induction thyristor power supply (1.5 kilo pulse per second), exhibited a virucidal effect against adenoviruses. Viral titer was reduced by one log within 0.94 min. Results from detection of viral capsid proteins, hexon and penton, by Western blotting and immunochromatography were unaffected by the plasma treatment. In contrast, analysis using the polymerase chain reaction suggested that plasma treatment damages the viral genomic DNA. Reactive chemical products (hydrogen peroxide, nitrate, and nitrite), ultraviolet light (UV-A) and slight temperature elevations were observed during the operation of the gas plasma device. Viral titer versus intensity of each potential virucidal factor were used to identify the primary mechanism of disinfection of adenovirus. Although exposure to equivalent levels of UV-A or heat treatment did not inactivate adenovirus, treatment with a relatively low concentration of hydrogen peroxide efficiently inactivated the virus. Our results suggest the nitrogen gas plasma generates reactive chemical products that inactivate adenovirus by damaging the viral genomic DNA. PMID:27322066

  11. Methods for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry

    DOEpatents

    Chan, George C. Y.; Hieftje, Gary M.

    2010-08-03

    A method for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry (ICP-AES). ICP-AES analysis is performed across a plurality of selected locations in the plasma on an unknown sample, collecting the light intensity at one or more selected wavelengths of one or more sought-for analytes, creating a first dataset. The first dataset is then calibrated with a calibration dataset creating a calibrated first dataset curve. If the calibrated first dataset curve has a variability along the location within the plasma for a selected wavelength, errors are present. Plasma-related errors are then corrected by diluting the unknown sample and performing the same ICP-AES analysis on the diluted unknown sample creating a calibrated second dataset curve (accounting for the dilution) for the one or more sought-for analytes. The cross-over point of the calibrated dataset curves yields the corrected value (free from plasma related errors) for each sought-for analyte.

  12. Inductive Measurement of Plasma Jet Electrical Conductivity (MSFC Center Director's discretionary Fund). Part 2

    NASA Technical Reports Server (NTRS)

    Turner, M. W.; Hawk, C. W.; Litchford, R. J.

    2001-01-01

    Measurement of plasma jet electrical conductivity has utility in the development of explosively driven magnetohydrodynamic (MHD) energy converters as well as magnetic flux compression reaction chambers for nuclear/chemical pulse propulsion and power. Within these types of reactors, the physical parameter of critical importance to underlying MHD processes is the magnetic Reynolds number, the value of which depends upon the product of plasma electrical conductivity and velocity. Therefore, a thorough understanding of MHD phenomena at high magnetic Reynolds number is essential, and methods are needed for the accurate and reliable measurement of electrical conductivity in high-speed plasma jets. It is well known that direct measurements using electrodes suffer from large surface resistance, and an electrodeless technique is desired. To address this need, an inductive probing scheme, originally developed for shock tube studies, has been adapted. In this method, the perturbation of an applied magnetic field by a plasma jet induces a voltage in a search coil, which, in turn, can be used to infer electrical conductivity through the inversion of a Fredholm integral equation of the first kind. A 1-in.-diameter probe using a light-gas gun. Exploratory laboratory experiments were carried out using plasma jets expelled from 15-g shaped charges. Measured conductivities were in the range of 4 kS/m for unseeded octol charges and 26 kS/m for seeded octol charges containing 2-percent potassium carbonate by mass.

  13. Nitrogen Gas Plasma Generated by a Static Induction Thyristor as a Pulsed Power Supply Inactivates Adenovirus.

    PubMed

    Sakudo, Akikazu; Toyokawa, Yoichi; Imanishi, Yuichiro

    2016-01-01

    Adenovirus is one of the most important causative agents of iatrogenic infections derived from contaminated medical devices or finger contact. In this study, we investigated whether nitrogen gas plasma, generated by applying a short high-voltage pulse to nitrogen using a static induction thyristor power supply (1.5 kilo pulse per second), exhibited a virucidal effect against adenoviruses. Viral titer was reduced by one log within 0.94 min. Results from detection of viral capsid proteins, hexon and penton, by Western blotting and immunochromatography were unaffected by the plasma treatment. In contrast, analysis using the polymerase chain reaction suggested that plasma treatment damages the viral genomic DNA. Reactive chemical products (hydrogen peroxide, nitrate, and nitrite), ultraviolet light (UV-A) and slight temperature elevations were observed during the operation of the gas plasma device. Viral titer versus intensity of each potential virucidal factor were used to identify the primary mechanism of disinfection of adenovirus. Although exposure to equivalent levels of UV-A or heat treatment did not inactivate adenovirus, treatment with a relatively low concentration of hydrogen peroxide efficiently inactivated the virus. Our results suggest the nitrogen gas plasma generates reactive chemical products that inactivate adenovirus by damaging the viral genomic DNA.

  14. Computational hydrodynamics and optical performance of inductively-coupled plasma adaptive lenses

    SciTech Connect

    Mortazavi, M.; Urzay, J. Mani, A.

    2015-06-15

    This study addresses the optical performance of a plasma adaptive lens for aero-optical applications by using both axisymmetric and three-dimensional numerical simulations. Plasma adaptive lenses are based on the effects of free electrons on the phase velocity of incident light, which, in theory, can be used as a phase-conjugation mechanism. A closed cylindrical chamber filled with Argon plasma is used as a model lens into which a beam of light is launched. The plasma is sustained by applying a radio-frequency electric current through a coil that envelops the chamber. Four different operating conditions, ranging from low to high powers and induction frequencies, are employed in the simulations. The numerical simulations reveal complex hydrodynamic phenomena related to buoyant and electromagnetic laminar transport, which generate, respectively, large recirculating cells and wall-normal compression stresses in the form of local stagnation-point flows. In the axisymmetric simulations, the plasma motion is coupled with near-wall axial striations in the electron-density field, some of which propagate in the form of low-frequency traveling disturbances adjacent to vortical quadrupoles that are reminiscent of Taylor-Görtler flow structures in centrifugally unstable flows. Although the refractive-index fields obtained from axisymmetric simulations lead to smooth beam wavefronts, they are found to be unstable to azimuthal disturbances in three of the four three-dimensional cases considered. The azimuthal striations are optically detrimental, since they produce high-order angular aberrations that account for most of the beam wavefront error. A fourth case is computed at high input power and high induction frequency, which displays the best optical properties among all the three-dimensional simulations considered. In particular, the increase in induction frequency prevents local thermalization and leads to an axisymmetric distribution of electrons even after introduction of

  15. Candidate plasma-facing materials for EUV lithography source components

    NASA Astrophysics Data System (ADS)

    Hassanein, Ahmed; Burtseva, Tatiana; Brooks, Jeff N.; Konkashbaev, Isak K.; Rice, Bryan J.

    2003-06-01

    Material selection and lifetime issues for extreme ultraviolet (EUV) lithography are of critical importance to the success of this technology for commercial applications. This paper reviews current trends in production and use of plasma-facing electrodes, insulators, and wall materials for EUV type sources. Ideal candidate materials should be able to: withstand high thermal shock from the short pulsed plasma; withstand high thermal loads without structural failure; reduce debris generation during discharge; and be machined accurately. We reviewed the literature on current and proposed fusion plasma-facing materials as well as current experience with plasma gun and other simulation devices. Both fusion and EUV source materials involve issues of surface erosion by particle sputtering and heat-induced evaporation/melting. These materials are either bare structural materials or surface coatings. EUV materials can be divided into four categories: wall, electrode, optical, and insulator materials. For electric discharge sources, all four types are required, whereas laser-produced plasma EUV sources do not require electrode and insulator materials. Several types of candidate alloy and other materials and methods of manufacture are recommended for each component of EUV lithography light sources.

  16. Low-temperature growth of gallium nitride films by inductively coupled-plasma-enhanced reactive magnetron sputtering

    SciTech Connect

    Ni, Chih-Jui; Chau-Nan Hong, Franklin

    2014-05-15

    Gallium nitride (GaN) films were grown on sapphire substrate by reactive magnetron sputtering. Inductively coupled-plasma (ICP) source was installed between the substrate holder and the sputtering target to increase the plasma density and the degree of ionization of nitrogen gas. Liquid Ga and Ar/N{sub 2} were used as the sputtering target and sputtering gases, respectively. X-ray diffraction measurements confirmed that the authors could grow high quality GaN crystallites at 500 °C. However, the crystalline GaN (0002) peak remained even by lowering the growth temperature down to 300 °C. The N:Ga ratio of the film grown at 500 °C was almost 1:1, and the nitrogen composition became higher toward the 1:1 N:Ga ratio with increasing the growth temperature. The high degree of ionization induced by ICP source was essential to the growth of high crystalline quality GaN films.

  17. Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma

    SciTech Connect

    Ding, Z. F.; Yuan, G. Y.; Gao, W.; Sun, J. C.

    2008-06-15

    In inductively coupled plasma sources, discharge transitions from electrostatic mode (E mode) to electromagnetic mode (H mode) and from H mode to E mode occur. In previous studies, only a few works paid attention to the effects of the impedance matching network. Cunge et al. [Plasma Sources Sci. Technol. 8, 576 (1999)] investigated the E-H and H-E mode transitions under two different impedance matching situations, but no physical mechanism or interpretation was presented. This issue is remained to be systematically and quantitatively investigated, and the underlying mechanism to be unveiled. In this paper, the effects of the impedance matching network were experimentally studied in electropositive argon gas by varying the series capacitance in an inversely L-shaped matching network. The positive and negative feedback regions are established according to the effect of varying the series capacitance on the output power of the rf power supply. It was found that under the same experimental parameters, the discharge mode transitions are apt to be discontinuous and continuous in the positive and negative feedback regions, respectively. In addition, the critical coil rf current (or applied power) at the mode transition, the hysteretic loop width, and the difference in applied power during the discharge mode transition vary with the series capacitance. The critical coil rf current at the E-H mode transition is not always higher than that at the H-E mode transition.

  18. A highly reliable trigger for vacuum ARC plasma source

    SciTech Connect

    Bernardet, H.; Godechot, X.; Jarjat, F.

    1996-08-01

    The authors have developed a reliable electrical trigger and its associated circuitry to fire vacuum arc plasma or ion source. They tested different embodiments of the trigger device in order to get a highly reliable one, which is able to perform more than 1.2 x 10{sup 6} shots at 60 A and 6.5 ps pulse length. The evolution of the ion current emitted has been recorded as a function of the number of shots. They have also investigated in which direction the plasma jet is emitted : axially or radially. This device can be used to fire a vacuum arc plasma or ion source by plasma injection. It has obvious advantage to be placed outside the cathode and therefore would ease maintenance of vacuum arc devices.

  19. Highly repetitive, extreme-ultraviolet radiation source based on a gas-discharge plasma.

    PubMed

    Bergmann, K; Schriever, G; Rosier, O; Müller, M; Neff, W; Lebert, R

    1999-09-01

    An extreme-ultraviolet (EUV) radiation source near the 13-nm wavelength generated in a small (1.1 J) pinch plasma is presented. The ignition of the plasma occurs in a pseudosparklike electrode geometry, which allows for omitting a switch between the storage capacity and the electrode system and for low inductive coupling of the electrically stored energy to the plasma. Thus energies of only a few joules are sufficient to create current pulses in the range of several kiloamperes, which lead to a compression and a heating of the plasmas to electron densities of more than 10(17) cm(-3) and temperatures of several tens of electron volts, which is necessary for emission in the EUV range. As an example, the emission spectrum of an oxygen plasma in the 11-18-nm range is presented. Transitions of beryllium- and lithium-like oxygen ions can be identified. Current waveform and time-resolved measurements of the EUV emission are discussed. In initial experiments a repetitive operation at nearly 0.2 kHz could be demonstrated. Additionally, the broadband emission of a xenon plasma generated in a 2.2-J discharge is presented.

  20. A Investigation of the Plasma Jet as AN Underwater Acoustic Source.

    NASA Astrophysics Data System (ADS)

    Smith, Robert David

    The plasma jet, a commonly used ignition device, has been investigated as a source of acoustic energy suitable for sub-bottom profiling. Named the plasma gun, the device discharges electrical energy in a cylindrical arc ignited in a gaseous environment surrounded by water. When the arc energy evaporates water, it produces a rapidly expanding vapor bubble that creates the acoustic pressure wave. Acoustic properties of the device are similar to small explosives, and to electric sparkers. Multiple bubble oscillations, a problem of explosive-type sources, are generally less troublesome for the plasma gun than with the sparker sources. Some degree of frequency control of the acoustic pulse is possible if proper values are selected for the electrical circuit components and for the total stored electrical energy. Peak acoustic pressures are controlled both by the total electric energy and by the rate it is delivered to the arc. These quantities are determined by capacitance, inductance, and charging voltage. Frequency components of the primary pressure pulse depend on the arc discharge frequency and on the immersion depth of the device. The bubble period depends primarily on the amount of energy discharged into the water; this in turn is proportional to the total stored electrical energy. The plasma gun has been compared to small air guns, pingers, sparkers, and boomers. Sub-bottom profiles obtained show penetration less than the 1 in^3 air gun but with more resolution. Stored energy in the plasma gun, however, was nearly five times less. Penetration was equal and resolution better than electric sparkers of the same energy. Penetration was better and resolution poorer than the pinger, and resolution poorer and penetration slightly better than the boomer source. Except for the sparkers, which used the same power supply, the plasma gun has a decided advantage in equipment size and ease of deployment.

  1. Induction heating pure vapor source of high temperature melting point materials on electron cyclotron resonance ion source.

    PubMed

    Kutsumi, Osamu; Kato, Yushi; Matsui, Yuuki; Kitagawa, Atsushi; Muramatsu, Masayuki; Uchida, Takashi; Yoshida, Yoshikazu; Sato, Fuminobu; Iida, Toshiyuki

    2010-02-01

    Multicharged ions that are needed are produced from solid pure material with high melting point in an electron cyclotron resonance ion source. We develop an evaporator by using induction heating (IH) with multilayer induction coil, which is made from bare molybdenum or tungsten wire without water cooling and surrounding the pure vaporized material. We optimize the shapes of induction coil and vaporized materials and operation of rf power supply. We conduct experiment to investigate the reproducibility and stability in the operation and heating efficiency. IH evaporator produces pure material vapor because materials directly heated by eddy currents have no contact with insulated materials, which are usually impurity gas sources. The power and the frequency of the induction currents range from 100 to 900 W and from 48 to 23 kHz, respectively. The working pressure is about 10(-4)-10(-3) Pa. We measure the temperature of the vaporized materials with different shapes, and compare them with the result of modeling. We estimate the efficiency of the IH vapor source. We are aiming at the evaporator's higher melting point material than that of iron. PMID:20192343

  2. Induction heating pure vapor source of high temperature melting point materials on electron cyclotron resonance ion source

    SciTech Connect

    Kutsumi, Osamu; Kato, Yushi; Matsui, Yuuki; Sato, Fuminobu; Iida, Toshiyuki; Kitagawa, Atsushi; Muramatsu, Masayuki; Uchida, Takashi; Yoshida, Yoshikazu

    2010-02-15

    Multicharged ions that are needed are produced from solid pure material with high melting point in an electron cyclotron resonance ion source. We develop an evaporator by using induction heating (IH) with multilayer induction coil, which is made from bare molybdenum or tungsten wire without water cooling and surrounding the pure vaporized material. We optimize the shapes of induction coil and vaporized materials and operation of rf power supply. We conduct experiment to investigate the reproducibility and stability in the operation and heating efficiency. IH evaporator produces pure material vapor because materials directly heated by eddy currents have no contact with insulated materials, which are usually impurity gas sources. The power and the frequency of the induction currents range from 100 to 900 W and from 48 to 23 kHz, respectively. The working pressure is about 10{sup -4}-10{sup -3} Pa. We measure the temperature of the vaporized materials with different shapes, and compare them with the result of modeling. We estimate the efficiency of the IH vapor source. We are aiming at the evaporator's higher melting point material than that of iron.

  3. Are Spicules the Primary Source of Hot Coronal Plasma?

    NASA Technical Reports Server (NTRS)

    Klimchuk, James A.

    2011-01-01

    The recent discovery of Type II spicules has generated considerable excitement. It has even been suggested that these ejections can account for a majority of the hot plasma observed in the corona, thus obviating the need for "coronal" heating. If this is the case, however, then there should be observational consequences. We have begun to examine some of these consequences and find reason to question the idea that spicules are the primary source of hot coronal plasma.

  4. Time-resolved studies of particle effects in laser ablation inductively coupled plasma-mass spectrometry

    SciTech Connect

    Perdian, D.; Bajic, S.; Baldwin, D.; Houk, R.

    2007-11-13

    Time resolved signals in laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) are studied to determine the influence of experimental parameters on ICP-induced fractionation effects. Differences in sample composition and morphology, i.e., ablating brass, glass, or dust pellets, have a profound effect on the time resolved signal. Helium transport gas significantly decreases large positive signal spikes arising from large particles in the ICP. A binder for pellets also reduces the abundance and amplitude of spikes in the signal. MO{sup +} ions also yield signal spikes, but these MO{sup +} spikes generally occur at different times from their atomic ion counterparts.

  5. Optimized condition for etching fused-silica phase gratings with inductively coupled plasma technology.

    PubMed

    Wang, Shunquan; Zhou, Changhe; Ru, Huayi; Zhang, Yanyan

    2005-07-20

    Polymer deposition is a serious problem associated with the etching of fused silica by use of inductively coupled plasma (ICP) technology, and it usually prevents further etching. We report an optimized etching condition under which no polymer deposition will occur for etching fused silica with ICP technology. Under the optimized etching condition, surfaces of the fabricated fused silica gratings are smooth and clean. Etch rate of fused silica is relatively high, and it demonstrates a linear relation between etched depth and working time. Results of the diffraction of gratings fabricated under the optimized etching condition match theoretical results well.

  6. Chemical recoveries of technetium-99 for various procedures using inductively coupled plasma-mass spectrometry

    SciTech Connect

    Ihsanullah; East, B.W.

    1993-12-31

    The procedure for the determination of {sup 99}Tc inductively coupled plasma-mass spectrometry (ICP-MS) was based on the modification of a variety of available separation techniques. Standard Ru and Rh solutions were used for checking decontaminations and instrument response respectively. Technetium-99 and {sup 95m}Tc tracers were applied as yield monitors using ICP-MS and gamma-ray spectrometry respectively. Percent recoveries are reported for a variety of radiochemical separation procedures for water (58-83%), seaweed (10-76%), and for soil matrices (19-79%).

  7. Characterization of silicon isotropic etch by inductively coupled plasma etcher for microneedle array fabrication

    NASA Astrophysics Data System (ADS)

    Ji, Jing; Tay, Francis E. H.; Miao, Jianmin; Sun, Jianbo

    2006-04-01

    This work investigates the isotropic etching properties in inductively coupled plasma (ICP) etcher for microneedle arrays fabrication. The effects of process variables including powers, gas and pressure on needle structure generation are characterized by factorial design of experiment (DOE). The experimental responses of vertical etching depth, lateral etching length, ratio of vertical etching depth to lateral etching length and photoresist etching rate are reported. The relevance of the etching variables is also presented. The obtained etching behaviours for microneedle structure generation will be applied to develop recipes to fabricate microneedles in designed dimensions.

  8. Evaluation of Inductively Couple Plasma-time-of-Flight Mass Spectrometry for Laser Ablation Analyses

    SciTech Connect

    S.J. Bajic; D.B. Aeschliman; D.P. Baldwin; R.S. Houk

    2003-09-30

    The purpose of this trip to LECO Corporation was to test the non-matrix matched calibration method and the principal component analysis (PCA) method on a laser ablation-inductively coupled plasma-time of flight mass spectrometry (LA-ICP-TOFMS) system. An LA-ICP-TOFMS system allows for multielement single-shot analysis as well as spatial analysis on small samples, because the TOFMS acquires an entire mass spectrum for all ions extracted simultaneously from the ICP. The TOFMS system differs from the double-focusing mass spectrometer, on which the above methods were developed, by having lower sensitivity and lower mass resolution.

  9. Separation of actinides using capillary extraction chromatography-inductively coupled plasma mass spectrometry.

    PubMed

    Peterson, Dominic S; Montoya, Velma M

    2009-08-01

    Trace levels of actinides have been separated on capillary extraction chromatography columns. Detection of the actinides was achieved using an inductively coupled plasma mass spectrometer, which was coupled with the extraction chromatography system. In this study, we compare 30-cm long, 4.6 mm i.d. columns to capillary columns (750 microm i.d.) with lengths from 30 cm up to 150 cm. The columns that were tested were packed with TRU resin. We were able to separate a mixture of five actinides ((232)Th, (238)U, (237)Np, (239)Pu, and (241)Am). This work has application to rapid bioassay as well as automated separations of actinide materials.

  10. UV and IR laser ablation for inductively coupled plasma mass spectrometry

    SciTech Connect

    Smith, M.R.; Koppenaal, D.W.; Farmer, O.T.

    1993-06-01

    Laser ablation particle plume compositions are characterized using inductively coupled plasma mass spectrometry (ICP/MS). This study evaluates the mass response characteristics peculiar to ICP/MS detection as a function of laser fluence and frequency. Evaluation of the ICP/MS mass response allows deductions to be made concerning how representative the laser ablation produced particle plume composition is relative to the targeted sample. Using a black glass standard, elemental fractionation was observed, primarily for alkalis and other volatile elements. The extent of elemental fractionation between the target sample and the sampled plume varied significantly as a function of laser fluences and IR and UV laser frequency.

  11. Statistical evaluation of an inductively coupled plasma atomic emission spectrometric method for routine water quality testing

    USGS Publications Warehouse

    Garbarino, J.R.; Jones, B.E.; Stein, G.P.

    1985-01-01

    In an interlaboratory test, inductively coupled plasma atomic emission spectrometry (ICP-AES) was compared with flame atomic absorption spectrometry and molecular absorption spectrophotometry for the determination of 17 major and trace elements in 100 filtered natural water samples. No unacceptable biases were detected. The analysis precision of ICP-AES was found to be equal to or better than alternative methods. Known-addition recovery experiments demonstrated that the ICP-AES determinations are accurate to between plus or minus 2 and plus or minus 10 percent; four-fifths of the tests yielded average recoveries of 95-105 percent, with an average relative standard deviation of about 5 percent.

  12. Nanoscale dry etching of germanium by using inductively coupled CF4 plasma

    NASA Astrophysics Data System (ADS)

    Shim, Kyu-Hwan; Yang, Ha Yong; Kil, Yeon-Ho; Yang, Hyeon Deok; Yang, Jong-Han; Hong, Woong-Ki; Kang, Sukill; Jeong, Tae Soo; Kim, Taek Sung

    2012-08-01

    The nanoscale dry etching of germanium was investigated by using inductively coupled CF4 plasma and electron-beam lithography. The optimal dose of PMMA as E-beam lithography resist was ˜200 mC/cm2. When ICP Power was 200W, CF4 gas flow rate was 40 sccm, and process pressure was 20 mTorr, it had a smooth surface and good etch rate. The etching selectivity of Ge wafer to PMMA resist was as low as ˜1.5. Various sub-100 nm dry-etching patterns have been obtained. SEM pictures showed good profile qualities with a smooth etching sidewall and ultrasmall etching features.

  13. Polymer coating on the surface of zirconia nanoparticles by inductively coupled plasma polymerization

    NASA Astrophysics Data System (ADS)

    He, Wei; Guo, Zhigang; Pu, Yikang; Yan, Luting; Si, Wenjie

    2004-08-01

    Polymer coating on the surface of inorganic ceramic nanoparticles is beneficial to decrease agglomeration and improve dispersion in organic solvent in ceramic injection moulding technology. A layer of thin polymer film on zirconia nanoparticles is deposited by inductively coupled ethylene/nitrogen plasma. Transmission electron microscopy photographs indicate the presence of uniform polymer coatings and the thickness of the polymer layer is estimated as several nanometers. The chemical structure of the film is revealed as quasi-polyethylene long hydrocarbon chain by x-ray photoelectron spectroscopy examination.

  14. Speciation of volatile selenium species in plants using gas chromatography/inductively coupled plasma mass spectrometry.

    PubMed

    Meija, Juris; Montes-Bayón, Maria; Caruso, Joseph A; Leduc, Danika L; Terry, Norman

    2004-01-01

    Gas chromatography/inductively coupled plasma mass spectrometry (GC/ICP-MS) coupled with solid phase micro-extraction can provide a simple, extremely selective and sensitive technique for the analysis of volatile sulfur and selenium compounds in the headspace of growing plants. In this work, the technique was used to evaluate the volatilization of selenium in wild-type and genetically-modified Brassica juncea seedlings. By converting toxic inorganic selenium in the soil to less toxic, volatile organic selenium, B. juncea might be useful in bioremediation of selenium contaminated soil.

  15. Preconcentration of heavy metals in urine and quantification by inductively coupled plasma atomic emission spectrometry.

    PubMed

    López-Artíguez, M; Cameán, A; Repetto, M

    1993-01-01

    This paper describes a method for the determination of heavy metals (Co, Ni, Cu, Cd, Pb) in urine by inductively coupled plasma atomic emission spectrometry (ICP-AES). The method proposed requires purification of the samples with activated charcoal under acidic conditions before preconcentration by complexation with ammonium pyrrolidinedithiocarbamate (APDC). The formed complexes are extracted with methyl isobutyl ketone (MIBK) and the resulting residue is finally digested under acid oxidant conditions. Because of its low detection limit (below 10 micrograms/L), this procedure can be applied conveniently for toxicological diagnostic purposes. PMID:8429621

  16. Dual radio frequency plasma source: Understanding via electrical asymmetry effect

    SciTech Connect

    Bora, B.; Bhuyan, H.; Favre, M.; Wyndham, E.; Wong, C. S.

    2013-04-21

    On the basis of the global model, the influences of driving voltage and frequency on electron heating in geometrically symmetrical dual capacitively coupled radio frequency plasma have been investigated. Consistent with the experimental and simulation results, non-monotonic behavior of dc self bias and plasma heating with increasing high frequency is observed. In addition to the local maxima of plasma parameters for the integer values of the ratio between the frequencies ({xi}), ourstudies also predict local maxima for odd integer values of 2{xi} as a consequence of the electrical asymmetry effect produced by dual frequency voltage sources.

  17. e+e- Plasma Photon Source

    SciTech Connect

    Hartouni, Ed P.

    2013-12-06

    This note addresses the idea of a photon source that is based on an e+e- plasma created by co-propagating beams of e+ and e-. The plasma has a well-defined temperature, and the thermal distribution of the charged particles is used to average over the relative velocity cross section multiplied by the relative velocity. Two relevant cross sections are the direct “free-free” annihilation of e+e- pairs in the plasma, and the radiative recombination of e+e- pairs into positronium (Ps) which subsequently undergoes annihilation.

  18. Model for a transformer-coupled toroidal plasma source

    NASA Astrophysics Data System (ADS)

    Rauf, Shahid; Balakrishna, Ajit; Chen, Zhigang; Collins, Ken

    2012-01-01

    A two-dimensional fluid plasma model for a transformer-coupled toroidal plasma source is described. Ferrites are used in this device to improve the electromagnetic coupling between the primary coils carrying radio frequency (rf) current and a secondary plasma loop. Appropriate components of the Maxwell equations are solved to determine the electromagnetic fields and electron power deposition in the model. The effect of gas flow on species transport is also considered. The model is applied to 1 Torr Ar/NH3 plasma in this article. Rf electric field lines form a loop in the vacuum chamber and generate a plasma ring. Due to rapid dissociation of NH3, NHx+ ions are more prevalent near the gas inlet and Ar+ ions are the dominant ions farther downstream. NH3 and its by-products rapidly dissociate into small fragments as the gas flows through the plasma. With increasing source power, NH3 dissociates more readily and NHx+ ions are more tightly confined near the gas inlet. Gas flow rate significantly influences the plasma characteristics. With increasing gas flow rate, NH3 dissociation occurs farther from the gas inlet in regions with higher electron density. Consequently, more NH4+ ions are produced and dissociation by-products have higher concentrations near the outlet.

  19. The PhIX High Intensity Plasma Source

    NASA Astrophysics Data System (ADS)

    Goulding, R. H.; Caughman, J. B. O.; Peng, Y.-K. M.; Rapp, J.; Rasmussen, D. A.; Biewer, T. M.; Canik, J. M.; Chen, G.; Diem, S. J.; Meitner, S. J.; Owen, L. W.

    2012-10-01

    The Physics Integration eXperiment (PhIX) is a linear high-intensity rf plasma source presently being constructed at ORNL that combines a high density helicon plasma generator with an electron heating section. It will be used to explore the physics related to heating an overdense, streaming plasma in a linear geometry by whistler waves and Electron Bernstein Waves (EBW), including optimization of heating efficiency and maximization of particle flux. Interactions between the plasma production and heating regions, and the source and a downstream target, will also be investigated. Experiments using the device will provide data for the design of an rf powered high particle flux (˜10^24/m^2- s), high heat flux(˜10 MW /m^2) steady-state linear plasma-materials test station (PMTS). In preparatory experiments, the helicon device has operated at power levels up to 90 kW, producing high plasma densities in He (6 x10^19 m-3) and D (> 4 x10^19 m-3), and has also operated at high magnetic field strength up to 0.5 T. Separate ECH experiments have demonstrated both whistler and EBW coupling at 6 GHz to an overdense plasma. A review of these experiments will be presented, as well as an overview of PhIX and its status.

  20. Atomic oxygen patterning from a biomedical needle-plasma source

    SciTech Connect

    Kelly, Seán; Turner, Miles M.

    2013-09-28

    A “plasma needle” is a cold plasma source operating at atmospheric pressure. Such sources interact strongly with living cells, but experimental studies on bacterial samples show that this interaction has a surprising pattern resulting in circular or annular killing structures. This paper presents numerical simulations showing that this pattern occurs because biologically active reactive oxygen and nitrogen species are produced dominantly where effluent from the plasma needle interacts with ambient air. A novel solution strategy is utilised coupling plasma produced neutral (uncharged) reactive species to the gas dynamics solving for steady state profiles at the treated biological surface. Numerical results are compared with experimental reports corroborating evidence for atomic oxygen as a key bactericidal species. Surface losses are considered for interaction of plasma produced reactants with reactive solid and liquid interfaces. Atomic oxygen surface reactions on a reactive solid surface with adsorption probabilities above 0.1 are shown to be limited by the flux of atomic oxygen from the plasma. Interaction of the source with an aqueous surface showed hydrogen peroxide as the dominant species at this interface.

  1. Atomic oxygen patterning from a biomedical needle-plasma source

    NASA Astrophysics Data System (ADS)

    Kelly, Seán; Turner, Miles M.

    2013-09-01

    A "plasma needle" is a cold plasma source operating at atmospheric pressure. Such sources interact strongly with living cells, but experimental studies on bacterial samples show that this interaction has a surprising pattern resulting in circular or annular killing structures. This paper presents numerical simulations showing that this pattern occurs because biologically active reactive oxygen and nitrogen species are produced dominantly where effluent from the plasma needle interacts with ambient air. A novel solution strategy is utilised coupling plasma produced neutral (uncharged) reactive species to the gas dynamics solving for steady state profiles at the treated biological surface. Numerical results are compared with experimental reports corroborating evidence for atomic oxygen as a key bactericidal species. Surface losses are considered for interaction of plasma produced reactants with reactive solid and liquid interfaces. Atomic oxygen surface reactions on a reactive solid surface with adsorption probabilities above 0.1 are shown to be limited by the flux of atomic oxygen from the plasma. Interaction of the source with an aqueous surface showed hydrogen peroxide as the dominant species at this interface.

  2. ECR plasma source for heavy ion beam charge neutralization

    SciTech Connect

    Efthimion, P.C.; Gilson, E.; Grisham, L.; Kolchin, P.; Davidson, E.C.; Yu, S.S.; Logan, B.G.

    2002-05-01

    Highly ionized plasmas are being considered as a medium for charge neutralizing heavy ion beams in order to focus beyond the space-charge limit. Calculations suggest that plasma at a density of 1-100 times the ion beam density and at a length {approx} 0.1-2 m would be suitable for achieving a high level of charge neutralization. An ECR source has been built at the Princeton Plasma Physics Laboratory (PPPL) to support a joint Neutralized Transport Experiment (NTX) at the Lawrence Berkeley National Laboratory (LBNL) to study ion beam neutralization with plasma. The ECR source operates at 13.6 MHz and with solenoid magnetic fields of 1-10 gauss. The goal is to operate the source at pressures {approx} 10{sup -6} Torr at full ionization. The initial operation of the source has been at pressures of 10{sup -4}-10{sup -1} Torr. Electron densities in the range of 10{sup 8}-10{sup 11} cm{sup -3} have been achieved. Low-pressure operation is important to reduce ion beam ionization. A cusp magnetic field has been installed to improve radial confinement and reduce the field strength on the beam axis. In addition, axial confinement is believed to be important to achieve lower-pressure operation. To further improve breakdown at low pressure, a weak electron source will be placed near the end of the ECR source.

  3. Surface Plasma Source Electrode Activation by Surface Impurities

    SciTech Connect

    Dudnikov, Vadim; Johnson, Rolland P.; Han, B.; Murray, S. N.; Pennisi, T. R.; Santana, M.; Stockli, Martin P.; Welton, R. F.

    2011-09-26

    In experiments with RF saddle antenna surface plasma sources (SPS), the efficiency of H{sup -} ion generation was increased by up to a factor of 5 by plasma electrode 'activation', without supplying additional Cs, by heating the collar to high temperature for several hours using hot air flow and plasma discharge. Without cracking or heating the cesium ampoule, but likely with Cs recovery from impurities, the achieved energy efficiency was comparable to that of conventionally cesiated SNS RF sources with an external or internal Cs supply. In the experiments, optimum cesiation was produced (without additional Cs) by the collection and trapping of traces of remnant cesium compounds from SPS surfaces. Such activation by accumulation of impurities on electrode surfaces can be a reason for H{sup -} emission enhancement in other so-called 'volume' negative ion sources.

  4. Simple filtered repetitively pulsed vacuum arc plasma source

    SciTech Connect

    Chekh, Yu.; Zhirkov, I. S.; Delplancke-Ogletree, M. P.

    2010-02-15

    A very simple design of cathodic filtered vacuum arc plasma source is proposed. The source without filter has only four components and none of them require precise machining. The source operates in a repetitively pulsed regime, and for laboratory experiments it can be used without water cooling. Despite the simple construction, the source provides high ion current at the filter outlet reaching 2.5% of 400 A arc current, revealing stable operation in a wide pressure range from high vacuum to oxygen pressure up to more than 10{sup -2} mbar. There is no need in complicated power supply system for this plasma source, only one power supply can be used to ignite the arc, to provide the current for the arc itself, to generate the magnetic field in the filter, and provide its positive electric biasing without any additional high power resistance.

  5. Efficient cesiation in RF driven surface plasma negative ion source.

    PubMed

    Belchenko, Yu; Ivanov, A; Konstantinov, S; Sanin, A; Sotnikov, O

    2016-02-01

    Experiments on hydrogen negative ions production in the large radio-frequency negative ion source with cesium seed are described. The system of directed cesium deposition to the plasma grid periphery was used. The small cesium seed (∼0.5 G) provides an enhanced H(-) production during a 2 month long experimental cycle. The gradual increase of negative ion yield during the long-term source runs was observed after cesium addition to the source. The degraded H(-) production was recorded after air filling to the source or after the cesium washing away from the driver and plasma chamber walls. The following source conditioning by beam shots produces the gradual recovery of H(-) yield to the high value. The effect of H(-) yield recovery after cesium coverage passivation by air fill was studied. The concept of cesium coverage replenishment and of H(-) yield recovery due to sputtering of cesium from the deteriorated layers is discussed. PMID:26932015

  6. Reasonable structure for the discharge type plasma source. [In Pulsed Plasma Thruster

    SciTech Connect

    An, S.M.

    1987-01-01

    Experiments conducted with a magnetoplasma thruster in which plasma production and acceleration were treated separately indicate that different plasma source geometries have the most direct effect on energy conversion efficiency. An analysis of cup and tube type constraining structures shows the cup type to incur the greatest losses. It is noted that a parallel rail-type open structure such as that employed by the Chinese MDT-2A thruster leads to substantial discharge process dispersion. It is emphasized that the type and performance characteristics of a plasma source have a critical influence on thruster behavior. 5 references.

  7. Low-frequency, self-sustained oscillations in inductively coupled plasmas used for optical pumping

    SciTech Connect

    Coffer, J.; Encalada, N.; Huang, M.; Camparo, J.

    2014-10-28

    We have investigated very low frequency, on the order of one hertz, self-pulsing in alkali-metal inductively-coupled plasmas (i.e., rf-discharge lamps). This self-pulsing has the potential to significantly vary signal-to-noise ratios and (via the ac-Stark shift) resonant frequencies in optically pumped atomic clocks and magnetometers (e.g., the atomic clocks now flying on GPS and Galileo global navigation system satellites). The phenomenon arises from a nonlinear interaction between the atomic physics of radiation trapping and the plasma's electrical nature. To explain the effect, we have developed an evaporation/condensation theory (EC theory) of the self-pulsing phenomenon.

  8. Expressing self-absorption in the analytical function of inductively coupled plasma atomic emission spectrometry

    NASA Astrophysics Data System (ADS)

    Kántor, Tibor; Bartha, András

    2015-11-01

    The self-absorption of spectral lines was studied with up to date multi-element inductively coupled plasma atomic emission spectrometry (ICP-AES) instrumentation using radial and axial viewing of the plasma, as well, performing line peak height and line peak area measurements. Two resonance atomic and ionic lines of Cd and Mg were studied, the concentration range was extended up to 2000 mg/L. At the varying analyte concentration, constant matrix concentration of 10,000 mg/L Ca was ensured in the pneumatically nebulized solutions. The physical and the phenomenological formulation of the emission analytical function is overviewed and as the continuity of the earlier results the following equation is offered:

  9. Removal of model proteins by means of low-pressure inductively coupled plasma discharge

    NASA Astrophysics Data System (ADS)

    Kylián, O.; Rauscher, H.; Gilliland, D.; Brétagnol, F.; Rossi, F.

    2008-05-01

    Surgical instruments are intended to come into direct contact with the patients' tissues and thus interact with their first immune defence system. Therefore they have to be cleaned, sterilized and decontaminated, in order to prevent any kind of infections and inflammations or to exclude the possibility of transmission of diseases. From this perspective, the removal of protein residues from their surfaces constitutes new challenges, since certain proteins exhibit high resistance to commonly used sterilization and decontamination techniques and hence are difficult to remove without inducing major damages to the object treated. Therefore new approaches must be developed for that purpose and the application of non-equilibrium plasma discharges represents an interesting option. The possibility to effectively remove model proteins (bovine serum albumin, lysozyme and ubiquitin) from surfaces of different materials (Si wafer, glass, polystyrene and gold) by means of inductively coupled plasma discharges sustained in different argon containing mixtures is demonstrated and discussed in this paper.

  10. Laser ablation inductively coupled plasma mass spectrometry measurement of isotope ratios in depleted uranium contaminated soils.

    PubMed

    Seltzer, Michael D

    2003-09-01

    Laser ablation of pressed soil pellets was examined as a means of direct sample introduction to enable inductively coupled plasma mass spectrometry (ICP-MS) screening of soils for residual depleted uranium (DU) contamination. Differentiation between depleted uranium, an anthropogenic contaminant, and naturally occurring uranium was accomplished on the basis of measured 235U/238U isotope ratios. The amount of sample preparation required for laser ablation is considerably less than that typically required for aqueous sample introduction. The amount of hazardous laboratory waste generated is diminished accordingly. During the present investigation, 235U/238U isotope ratios measured for field samples were in good agreement with those derived from gamma spectrometry measurements. However, substantial compensation was required to mitigate the effects of impaired pulse counting attributed to sample inhomogeneity and sporadic introduction of uranium analyte into the plasma.

  11. Sheath-limited unipolar induction in the solar wind. [plasma interactions with solar system bodies

    NASA Technical Reports Server (NTRS)

    Srnka, L. J.

    1975-01-01

    A model of the steady-state interaction between the solar wind and an electrically conducting body having neither an atmosphere nor an intrinsic magnetic field sufficient enough to deflect the plasma flow is presented which considers some effects of a plasma surface sheath on unipolar induction. The Sonett-Colburn (1967, 1968) unipolar dynamo model is reviewed, and it is noted that the unipolar dynamo response of an electrically conducting body in the solar wind's motional field can be controlled by sheath effects in certain cases where the body radius is less than a certain critical value. It is shown that sheath effects do not limit the unipolar response of the moon or Mercury since their body radii are much larger than their critical radii. Sheath effects are also considered for asteroids, the Martian satellites, the irregular Jovian satellites, the outer satellites of Saturn, and meteorite parent bodies in a primordial enhanced solar wind.

  12. E→H mode transition density and power in two types of inductively coupled plasma configuration

    SciTech Connect

    Wang, Jian; Du, Yin-chang; Zhang, Xiao; Zheng, Zhe; Liu, Yu; Xu, Liang; Wang, Pi; Cao, Jin-xiang

    2014-07-15

    E → H transition power and density were investigated at various argon pressures in inductively coupled plasma (ICP) in a cylindrical interlaid chamber. The transition power versus the pressure shows a minimum transition power at 4 Pa (ν/ω=1) for argon. Then the transition density hardly changes at low pressures (ν/ω≪1), but it increases clearly when argon pressure exceeds an appropriate value. In addition, both the transition power and transition density are lower in the re-entrant configuration of ICP compared with that in the cylindrical configuration of ICP. The result may be caused from the decrease of stochastic heating in the re-entrant configuration of ICP. This work is useful to understand E → H mode transition and control the transition points in real plasma processes.

  13. Non-inductive Solenoid-less Plasma Current Start-up in NSTX Using Transient CHI

    SciTech Connect

    Raman, R; Jarboe, T R; Nelson, B A; Bell, M G; Ono, M; Bigelow, T; Kaita, R; LeBlanc, B; Lee, K C; Maqueda, R; Menard, J; Paul, S

    2007-05-23

    Coaxial Helicity Injection (CHI) has been successfully used in the National Spherical Torus Experiment (NSTX) for a demonstration of closed flux current generation without the use of the central solenoid. The favorable properties of the Spherical Torus (ST) arise from its very small aspect ratio. However, small aspect ratio devices have very restricted space for a substantial central solenoid. Thus methods for initiating the plasma current without relying on induction from a central solenoid are essential for the viability of the ST concept. CHI is a promising candidate for solenoid-free plasma startup in a ST. The method has now produced closed flux current up to 160 kA verifying the high current capability of this method in a large ST built with conventional tokamak components.

  14. Laser ablation inductively coupled plasma mass spectrometry measurement of isotope ratios in depleted uranium contaminated soils.

    PubMed

    Seltzer, Michael D

    2003-09-01

    Laser ablation of pressed soil pellets was examined as a means of direct sample introduction to enable inductively coupled plasma mass spectrometry (ICP-MS) screening of soils for residual depleted uranium (DU) contamination. Differentiation between depleted uranium, an anthropogenic contaminant, and naturally occurring uranium was accomplished on the basis of measured 235U/238U isotope ratios. The amount of sample preparation required for laser ablation is considerably less than that typically required for aqueous sample introduction. The amount of hazardous laboratory waste generated is diminished accordingly. During the present investigation, 235U/238U isotope ratios measured for field samples were in good agreement with those derived from gamma spectrometry measurements. However, substantial compensation was required to mitigate the effects of impaired pulse counting attributed to sample inhomogeneity and sporadic introduction of uranium analyte into the plasma. PMID:14611049

  15. Simulations of the Plasma Structure of a Radial Line Slotted Antenna Plasma Source

    NASA Astrophysics Data System (ADS)

    Yoshikawa, Jun

    2011-10-01

    The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. This property renders the source useful for soft etch applications and thin film processing for which low ion energy is desirable. Another property of the diffusion zone is that the plasma density falls from the axis to the walls. Static magnetic fields at the walls of other plasma sources have been shown to impede electron losses to walls lowering their loss rate and changing the plasma profile. In this presentation, the impact of different magnetic field configurations on the diffusion zone plasma structure will be described. To do this, an ambipolar-electromagnetic field model previously used to describe RLSA plasmas is modified to account for the impact of magnetic fields on transport coefficients and plasma chemistry. Resonant and other effects of magnetic field are also discussed.

  16. 21 CFR 640.64 - Collection of blood for Source Plasma.

    Code of Federal Regulations, 2010 CFR

    2010-04-01

    ... 21 Food and Drugs 7 2010-04-01 2010-04-01 false Collection of blood for Source Plasma. 640.64... (CONTINUED) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.64 Collection of blood for Source Plasma. (a) Supervision. All blood for the collection of Source Plasma...

  17. 21 CFR 640.64 - Collection of blood for Source Plasma.

    Code of Federal Regulations, 2011 CFR

    2011-04-01

    ... 21 Food and Drugs 7 2011-04-01 2010-04-01 true Collection of blood for Source Plasma. 640.64... (CONTINUED) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.64 Collection of blood for Source Plasma. (a) Supervision. All blood for the collection of Source Plasma...

  18. 21 CFR 640.64 - Collection of blood for Source Plasma.

    Code of Federal Regulations, 2012 CFR

    2012-04-01

    ... 21 Food and Drugs 7 2012-04-01 2012-04-01 false Collection of blood for Source Plasma. 640.64... (CONTINUED) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.64 Collection of blood for Source Plasma. (a) Supervision. All blood for the collection of Source Plasma...

  19. 21 CFR 640.64 - Collection of blood for Source Plasma.

    Code of Federal Regulations, 2013 CFR

    2013-04-01

    ... 21 Food and Drugs 7 2013-04-01 2013-04-01 false Collection of blood for Source Plasma. 640.64... (CONTINUED) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.64 Collection of blood for Source Plasma. (a) Supervision. All blood for the collection of Source Plasma...

  20. 21 CFR 640.64 - Collection of blood for Source Plasma.

    Code of Federal Regulations, 2014 CFR

    2014-04-01

    ... 21 Food and Drugs 7 2014-04-01 2014-04-01 false Collection of blood for Source Plasma. 640.64... (CONTINUED) BIOLOGICS ADDITIONAL STANDARDS FOR HUMAN BLOOD AND BLOOD PRODUCTS Source Plasma § 640.64 Collection of blood for Source Plasma. (a) Supervision. All blood for the collection of Source Plasma...

  1. Simple microwave preionization source for ohmic plasmas

    NASA Astrophysics Data System (ADS)

    Choe, W.; Kwon, Gi-Chung; Kim, Junghee; Kim, Jayhyun; Jeon, Sang-Jean; Huh, Songwhe

    2000-07-01

    A simple economical 2.45 GHz microwave system has been developed and utilized for preionization on the Korea Advanced Institute of Science and Technology (KAIST)-TOKAMAK. The magnetron microwave source was obtained from a widely used, household microwave oven. Since ac operation of the magnetron is not suitable for tokamak application, the magnetron cathode bias circuit was modified to obtain continuous and stable operation of the magnetron for several hundred milliseconds. Application of the developed microwave system to KAIST-TOKAMAK resulted in a reduction of ohmic flux consumption.

  2. Inductive Pulsed Plasma Thruster Development and Testing at NASA-MSFC

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.

    2013-01-01

    THE inductive pulsed plasma thruster (IPPT) is an electrodeless space propulsion device where a capacitor is charged to an initial voltage and then discharged producing a high current pulse through a coil. The field produced by this pulse ionizes propellant, inductively driving current in a plasma located near the face of the coil. Once the plasma is formed it can be accelerated and expelled at a high exhaust velocity by the electromagnetic Lorentz body force arising from the interaction of the induced plasma current and the magnetic field produced by the current in the coil. In the present work, we present a summary of the IPPT research and development conducted at NASA's Marshall Space Flight Center (MSFC). As a higher-power, still relatively low readiness level system, there are many issues associated with the eventual deployment and use of the IPPT as a primary propulsion system on spacecraft that remain to be addressed. The present program aimed to fabricate and test hardware to explore how these issues could be addressed. The following specific areas were addressed within the program and will be discussed within this paper. a) Conical theta-pinch IPPT geometry thruster configuration. b) Repetition-rate multi-kW thruster pulsing. c) Long-lifetime pulsed gas valve. d) Fast pulsed gas valve driver and controller. e) High-voltage, repetitive capacitor charging power processing unit. During the course of testing, a number of specific tests were conducted, including several that, to our knowledge, have either never been previously conducted (such as multi-KW repetition-rate operation) or have not been performed since the early 1990s (direct IPPT thrust measurements).2 Conical theta-pinch IPPT thrust stand measurements are presented in Fig. 1 while various time-integrated and time

  3. A new source of lunar electromagnetic induction - Forcing by the diamagnetic cavity

    NASA Technical Reports Server (NTRS)

    Sonett, C. P.; Wiskerchen, M. J.

    1977-01-01

    Analysis of the power spectral densities (PSD's) of eight 50-hour time series from Apollo 12 lunar surface magnetometer (LSM) and isochronous Explorer 35 Ames magnetometer data points to the existence of a new source of electromagnetic induction in the interior of the moon which is independent of the transverse electric mode. This source is hypothesized to arise from extension of the cavity diamagnetic field into the moon in analogy with the fringing field of a solenoid.

  4. Electromagnetic induction by finite wavenumber source fields in 2-D lateral heterogeneities - The transverse electric mode

    NASA Technical Reports Server (NTRS)

    Hermance, J. F.

    1984-01-01

    Electromagnetic induction in a laterally homogeneous earth is analyzed in terms of a source field with finite dimensions. Attention is focused on a time-varying two-dimensional current source directed parallel to the strike of a two-dimensional anomalous structure within the earth, i.e., the E-parallel mode. The spatially harmonic source field is expressed as discontinuities in the magnetic (or electric) field of the current in the source. The model is applied to describing the magnetic gradients across megatectonic features, and may be used to predict the magnetic fields encountered by a satellite orbiting above the ionosphere.

  5. Comparison of Plasma Activation of Thin Water Layers by Direct and Remote Plasma Sources

    NASA Astrophysics Data System (ADS)

    Kushner, Mark

    2014-10-01

    Plasma activation of liquids is now being investigated for a variety of biomedical applications. The plasma sources used for this activation can be generally classified as direct (the plasma is in contact with the surface of the liquid) or remote (the plasma does not directly touch the liquid). The direct plasma source may be a dielectric barrier discharge (DBD) where the surface of the liquid is a floating electrode or a plasma jet in which the ionization wave forming the plasma plume reaches the liquid. The remote plasma source may be a DBD with electrodes electrically isolated from the liquid or a plasma jet in which the ionization wave in the plume does not reach the liquid. In this paper, a comparison of activation of thin water layers on top of tissue, as might be encountered in wound healing, will be discussed using results from numerical investigations. We used the modeling platform nonPDPSIM to simulate direct plasma activation of thin water layers using DBDs and remote activation using plasma jets using up to hundreds of pulses. The DBDs are sustained in humid air while the plasma jets consist of He/O2 mixtures flowed into humid air. For similar number of pulses and energy deposition, the direct DBD plasma sources produce more acidification and higher production of nitrates/nitrites in the liquid. This is due to the accumulation of NxOy plasma jets, the convective flow removes many of these species prior to their diffusing into the water or reacting to form higher nitrogen oxides. This latter effect is sensitive to the repetition rate which determines whether reactive species formed during prior pulses overlap with newly produced reactive species. in the gas phase. In the plasma jets, the convective flow removes many of these species prior to their diffusing into the water or reacting to form higher nitrogen oxides. This latter effect is sensitive to the repetition rate which determines whether reactive species formed during prior pulses overlap with

  6. High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

    NASA Astrophysics Data System (ADS)

    Marinov, Daniil; Foucher, Mickaël; Campbell, Ewen; Brouard, Mark; Chabert, Pascal; Booth, Jean-Paul

    2016-06-01

    We propose a method to measure the densities of vibrationally excited Cl2(v) molecules in levels up to v  =  3 in pure chlorine inductively coupled plasmas (ICPs). The absorption continuum of Cl2 in the 250-450 nm spectral range is deconvoluted into the individual components originating from the different vibrational levels of the ground state, using a set of ab initio absorption cross sections. It is shown that gas heating at constant pressure is the major depletion mechanism of the Cl2 feedstock in the plasma. In these line-integrated absorption measurements, the absorption by the hot (and therefore rarefied) Cl2 gas in the reactor centre is masked by the cooler (and therefore denser) Cl2 near the walls. These radial gradients in temperature and density make it difficult to assess the degree of vibrational excitation in the centre of the reactor. The observed line-averaged vibrational distributions, when analyzed taking into account the radial temperature gradient, suggest that vibrational and translational degrees of freedom in the plasma are close to local equilibrium. This can be explained by efficient vibrational-translational (VT) relaxation between Cl2 and Cl atoms. Besides the Cl2(v) absorption band, a weak continuum absorption is observed at shorter wavelengths, and is attributed to photodetachment of Cl- negative ions. Thus, line-integrated densities of negative ions in chlorine plasmas can be directly measured using broad-band absorption spectroscopy.

  7. Inductively coupled plasma mass spectrometry in the analysis of biological samples and pharmaceutical drugs

    NASA Astrophysics Data System (ADS)

    Ossipov, K.; Seregina, I. F.; Bolshov, M. A.

    2016-04-01

    Inductively coupled plasma mass spectrometry (ICP-MS) is widely used in the analysis of biological samples (whole blood, serum, blood plasma, urine, tissues, etc.) and pharmaceutical drugs. The shortcomings of this method related to spectral and non-spectral interferences are manifested in full measure in determination of the target analytes in these complex samples strongly differing in composition. The spectral interferences are caused by similarity of masses of the target component and sample matrix components. Non-spectral interferences are related to the influence of sample matrix components on the physicochemical processes taking place during formation and transportation of liquid sample aerosols into the plasma, on the value and spatial distribution of plasma temperature and on the transmission of the ion beam from the interface to mass spectrometer detector. The review is devoted to analysis of different mechanisms of appearance of non-spectral interferences and to ways for their minimization or elimination. Special attention is paid to the techniques of biological sample preparation, which largely determine the mechanisms of the influence of sample composition on the results of element determination. The ways of lowering non-spectral interferences by instrumental parameter tuning and application of internal standards are considered. The bibliography includes 189 references.

  8. Electron energy probability function and L-p similarity in low pressure inductively coupled bounded plasma

    NASA Astrophysics Data System (ADS)

    Bhattacharjee, Sudeep; Chatterjee, Sanghamitro; Charles, Christine; Boswell, Roderick

    2015-02-01

    Particle-In-Cell (PIC) simulations are carried out to investigate the effect of discharge length (L) and pressure (p) on Electron Energy Probability Function (EEPF) in a low pressure radio frequency (rf) inductively coupled plasma at 13.56 MHz. It is found that for both cases of varying L (0.1 - 0.5 m) and p (1 - 10 mTorr), the EEPF is a bi-Maxwellian with a step in the bounded direction (x) and in the symmetric unbounded directions (y, z) the EEPF are a Maxwellian with a hot tail. The plasma space potential decreases with increase in both L and p, the trapped electrons having energies in the range 0 to 20 eV. In a conventional discharge bounded in all directions, we infer that L and p are similarity parameters for low energy electrons trapped in the bulk plasma that have energies below the plasma space potential (eVp). The simulation results are consistent with a particle balance model.

  9. Langmuir Probe Measurements of Inductively Coupled Plasma in CF4/AR/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Cruden, Brett; Sharma, Surendra; Meyyappan, Meyya

    2001-01-01

    Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i)), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad lip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

  10. Langmuir Probe Measurements of Inductively Coupled Plasmas in CF4/Ar/O2 Mixtures

    NASA Technical Reports Server (NTRS)

    Rao, M. V. V. S.; Cruden, Brett; Sharma, Surendra; Meyyappan, Meyya

    2001-01-01

    Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF (radio frequency) power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad dip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

  11. Mode transition in CF{sub 4} + Ar inductively coupled plasma

    SciTech Connect

    Liu, Wei; Gao, Fei; Zhao, Shu-Xia; Li, Xue-Chun; Wang, You-Nian

    2013-12-15

    The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF{sub 4} + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF{sub 4} increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF{sub 4} gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF{sub 4} at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF{sub 4} gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

  12. The ionization length in plasmas with finite temperature ion sources

    NASA Astrophysics Data System (ADS)

    Jelić, N.; Kos, L.; Tskhakaya, D. D.; Duhovnik, J.

    2009-12-01

    The ionization length is an important quantity which up to now has been precisely determined only in plasmas which assume that the ions are born at rest, i.e., in discharges known as "cold ion-source" plasmas. Presented here are the results of our calculations of the ionization lengths in plasmas with an arbitrary ion source temperature. Harrison and Thompson (H&T) [Proc. Phys. Soc. 74, 145 (1959)] found the values of this quantity for the cases of several ion strength potential profiles in the well-known Tonks-Langmuir [Phys. Rev. 34, 876 (1929)] discharge, which is characterized by "cold" ion temperature. This scenario is also known as the "singular" ion-source discharge. The H&T analytic result covers cases of ion sources proportional to exp(βΦ) with Φ the normalized plasma potential and β =0,1,2 values, which correspond to particular physical scenarios. Many years following H&T's work, Bissell and Johnson (B&J) [Phys. Fluids 30, 779 (1987)] developed a model with the so-called "warm" ion-source temperature, i.e., "regular" ion source, under B&J's particular assumption that the ionization strength is proportional to the local electron density. However, it appears that B&J were not interested in determining the ionization length at all. The importance of this quantity to theoretical modeling was recognized by Riemann, who recently answered all the questions of the most advanced up-to-date plasma-sheath boundary theory with cold ions [K.-U. Riemann, Phys. Plasmas 13, 063508 (2006)] but still without the stiff warm ion-source case solution, which is highly resistant to solution via any available analytic method. The present article is an extension of H&T's results obtained for a single point only with ion source temperature Tn=0 to arbitrary finite ion source temperatures. The approach applied in this work is based on the method recently developed by Kos et al. [Phys. Plasmas 16, 093503 (2009)].

  13. Effect of an Additional, Parallel Capacitor on Pulsed Inductive Plasma Accelerator Performance

    NASA Technical Reports Server (NTRS)

    Polzin, Kurt A.; Sivak, Amy D.; Balla, Joseph V.

    2011-01-01

    A model of pulsed inductive plasma thrusters consisting of a set of coupled circuit equations and a one-dimensional momentum equation has been used to study the effects of adding a second, parallel capacitor into the system. The equations were nondimensionalized, permitting the recovery of several already-known scaling parameters and leading to the identification of a parameter that is unique to the particular topology studied. The current rise rate through the inductive acceleration coil was used as a proxy measurement of the effectiveness of inductive propellant ionization since higher rise rates produce stronger, potentially better ionizing electric fields at the coil face. Contour plots representing thruster performance (exhaust velocity and efficiency) and current rise rate in the coil were generated numerically as a function of the scaling parameters. The analysis reveals that when the value of the second capacitor is much less than the first capacitor, the performance of the two-capacitor system approaches that of the single-capacitor system. In addition, as the second capacitor is decreased in value the current rise rate can grow to be twice as great as the rise rate attained in the single capacitor case.

  14. Viscous effects on motion and heating of electrons in inductively coupled plasma reactors

    SciTech Connect

    Chang, C.H.; Bose, D.

    1999-10-01

    A transport model is developed for nonlocal effects on motion and heating of electrons in inductively coupled plasma reactors. The model is based on the electron momentum equation derived from the Boltzmann equation, retaining anisotropic stress components which in fact are viscous stresses. The resulting model consists of transport equations for the magnitude of electron velocity oscillation and terms representing energy dissipation due to viscous stresses in the electron energy equation. In this model, electrical current is obtained in a nonlocal manner due to viscous effects, instead of Ohm's law or the electron momentum equation without viscous effects, while nonlocal heating of electrons is represented by the viscous dissipation. Computational results obtained by two-dimensional numerical simulations show that nonlocal determination of electrical current indeed is important, and viscous dissipation becomes an important electron heating mechanism at low pressures. It is suspected that viscous dissipation in inductively coupled plasma reactors in fact represents stochastic heating of electrons, and this possibility is exploited by discussing physical similarities between stochastic heating and energy dissipation due to the stress tensor.

  15. [Nonradioactive iodine-labeled antibodies-inductively coupled plasma mass spectrometry for immunoassay].

    PubMed

    Li, Jing-Xi; Wang, Xiao-Ru; Zhuang, Zhi-Xia; Cui, Wei-Gang

    2010-03-01

    In the present study, the system of nonradioactive iodine-labeled-antibodies linking inductively coupled plasma mass spectrometry for immunoassay was reported. The goat-anti-Escherichia coli and goat anti rabbit were considered as simulant antigen and antibody respectively in order to establish a new method of immunoassay by inductively coupled plasma mass spectrometry which has the advantage of high sensitivity, low detection limit and preferable linearity range. During the experiment, the N-bromosuccinimide, a mild oxidant, was used to oxidize the non-radioactive iodine (127 I) that labeled the protein. The method of nonradioactive iodine labeled protein was established and the best labeling condition was explored. The compound of I was purified by Sephadex G50 column chromatography, then the stability and activity were examined. The results showed that the labeling program was simple, reaction time was within two minutes, the labeling yield achieved 63.12% and none of I shed from the compound after 96 hours. The simulant antigen and antibody reacted on polystyrene microtiter plate and the I was detected by ICP-MS, the detection limit of the method was 0.12 mg x L(-1), relative standard deviation (n = 9) was less than 3% and the linearly dependent coefficient was 0.998 7. This system can also be used in analysis of other protein, nucleic acid and so on.

  16. Determination of the rare-earth elements in geological materials by inductively coupled plasma mass spectrometry

    USGS Publications Warehouse

    Lichte, F.E.; Meier, A.L.; Crock, J.G.

    1987-01-01

    A method of analysis of geological materials for the determination of the rare-earth elements using the Inductively coupled plasma mass spectrometric technique (ICP-MS) has been developed. Instrumental parameters and factors affecting analytical results have been first studied and then optimized. Samples are analyzed directly following an acid digestion, without the need for separation or preconcentration with limits of detection of 2-11 ng/g, precision of ?? 2.5% relative standard deviation, and accuracy comparable to inductively coupled plasma emission spectrometry and instrumental neutron activation analysis. A commercially available ICP-MS instrument is used with modifications to the sample introduction system, torch, and sampler orifice to reduce the effects of high salt content of sample solutions prepared from geologic materials. Corrections for isobaric interferences from oxide ions and other diatomic and triatomic ions are made mathematically. Special internal standard procedures are used to compensate for drift in metahmetal oxide ratios and sensitivity. Reference standard values are used to verify the accuracy and utility of the method.

  17. Fluid-dynamic characterization of a radio-frequency induction thermal plasma system for nanoparticle synthesis

    NASA Astrophysics Data System (ADS)

    Colombo, V.; Deschenaux, C.; Ghedini, E.; Gherardi, M.; Jaeggi, C.; Leparoux, M.; Mani, V.; Sanibondi, P.

    2012-08-01

    The fluid flow in a radio-frequency induction thermal plasma (RF-ITP) system for the synthesis of nanoparticles has been characterized using three- and two-dimensional modelling supported by enthalpy probe and calorimetric measurements in order to provide insights for the improvement of the process. The RF-ITP system is composed of a commercial inductively coupled plasma torch mounted on a reaction chamber that is equipped with viewports for diagnostics. The three-dimensional model predicted an almost axisymmetric temperature field in the reaction chamber in agreement with enthalpy probe measurements performed along two perpendicular scan axes, whereas recirculating flow patterns resulted in being strongly non-axisymmetric. Temperature profiles at two distances (60 mm and 100 mm) from the torch outlet have been calculated using two-dimensional modelling and compared with enthalpy probe measurements for different operating conditions with the aim of validating the predictive ability of the modelling tool. Calorimetric measurements have been performed in order to estimate the power coupled to the torch, which is usually an arbitrary input parameter for the models. Poor agreement was obtained between energy balances from modelling and from calorimetric measurements and, starting from this, a discussion on the uncertainties in the calculation of the radiative losses has been proposed. Finally, new insights for the improvement of the process of nanoparticle synthesis in the RF-ITP system are suggested.

  18. Operation of Ferroelectric Plasma Sources in a Gas Discharge Mode

    SciTech Connect

    A. Dunaevsky; N.J. Fisch

    2004-03-08

    Ferroelectric plasma sources in vacuum are known as sources of ablative plasma, formed due to surface discharge. In this paper, observations of a gas discharge mode of operation of the ferroelectric plasma sources (FPS) are reported. The gas discharge appears at pressures between approximately 20 and approximately 80 Torr. At pressures of 1-20 Torr, there is a transition from vacuum surface discharge to the gas discharge, when both modes coexist and the surface discharges sustain the gas discharge. At pressures between 20 and 80 Torr, the surface discharges are suppressed, and FPS operate in pure gas discharge mode, with the formation of almost uniform plasma along the entire surface of the ceramics between strips. The density of the expanding plasma is estimated to be about 1013 cm-3 at a distance of 5.5 mm from the surface. The power consumption of the discharge is comparatively low, making it useful for various applications. This paper also presents direct measurements of the yield of secondary electron emission from ferroelectric ceramics, which, at low energies of primary electrons, is high and dependent on the polarization of the ferroelectric material

  19. A low-energy linear oxygen plasma source

    SciTech Connect

    Anders, Andre; Yushkov, Georgy Yu.

    2007-01-08

    A new version of a Constricted Plasma Source is described,characterized by all metal-ceramic construction, a linear slit exit of180 mm length, and cw-operation (typically 50 kHz) at an average power of1.5 kW. The plasma source is here operated with oxygen gas, producingstreaming plasma that contains mainly positive molecular and atomic ions,and to a much lesser degree, negative ions. The maximum total ion currentobtained was about 0.5 A. The fraction of atomic ions reached more than10 percent of all ions when the flow rate was less then 10 sccm O2,corresponding to a chamber pressure of about 0.5 Pa for the selectedpumping speed. The energy distribution functions of the different ionspecies were measured with a combinedmass spectrometer and energyanalyzer. The time-averaged distribution functions were broad and rangedfrom about 30eV to 90 eV at 200 kHz and higher frequencies, while theywere only several eV broad at 50 kHz and lower frequencies, with themaximum located at about 40 eV for the grounded anode case. This maximumwas shifted down to about 7 eV when the anode was floating, indicatingthe important role of the plasma potential for the ion energy for a givensubstrate potential. The source could be scaled to greater length and maybe useful for functionalization of surfaces and plasma-assisteddeposition of compound films.

  20. Determination of plasma parameters in solar zebra radio sources

    NASA Astrophysics Data System (ADS)

    Karlický, M.; Yasnov, L. V.

    2015-09-01

    Aims: We present a new method for determining the magnetic field strength and plasma density in the solar zebra radio sources. Methods: Using the double plasma resonance (DPR) model of the zebra emission, we analytically derived the equations for computing the gyroharmonic number s of selected zebra lines and then solved these equations numerically. Results: The method was successfully tested on artificially generated zebras and then applied to observed ones. The magnetic field strength and plasma density in the radio sources were determined. Simultaneously, we evaluated the parameter Lnb = 2Lb/ (2Ln - Lb), where Ln and Lb are the characteristic scale-heights of the plasma density and magnetic field strength in the zebra source, respectively. Computations show that the maximum frequency of the low-polarized zebras is about 8 GHz, in very good agreement with observations. For the high-polarized zebras, this limit is about four times lower. Microwave zebras are preferentially generated in the regions with steep gradients of the plasma density, such as in the transition region. In models with smaller density gradients, such as those with a barometric density profile, the microwave zebras cannot be produced owing to the strong bremsstrahlung and cyclotron absorptions. We also show that our DPR model is able to explain the zebras with frequency-equidistant zebra lines.

  1. Experiments with planar inductive ion source meant for creation ofH+ Beams

    SciTech Connect

    Vainionpaa, J.H.; Kalvas, T.; Hahto, S.K.; Reijonen, J.

    2007-02-07

    In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum and alumina (AlO{sub 2}). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. Highest proton fraction of {approx} 8% at 2000 W of rf-power and at pressure of 1.3 Pa was measured using AlO{sub 2} plasma chamber and no multicusp confinement. For all the compared ion sources at 1000W of rf-power, source with multicusp confinement and AlO2 plasma chamber yields highest current density of 82.7 mA/cm{sup 2} at operation pressure of 4 Pa. From the same source highest measured current density of 143 mA/cm{sup 2} at 1.3 Pa and 2200W of rf-power was achieved. Multicusp confinement increased the maximum extracted current up to factor of two. Plasma production with different antenna geometries was also studied. Antenna tests were performed using same source geometry as in source material study with AlO{sub 2} plasma chamber and multicusp confinement. The highest current density was achieved with 4.5 loop solenoid antenna with 6 cm diameter. Slightly lower current density with lower pressure was achieved using tightly wound 3 loop spiral antenna with 3.3 cm ID and 6 cm OD.

  2. Method and apparatus for plasma source ion implantation

    DOEpatents

    Conrad, John R.

    1988-01-01

    Ion implantation into surfaces of three-dimensional targets is achieved by forming an ionized plasma about the target within an enclosing chamber and applying a pulse of high voltage between the target and the conductive walls of the chamber. Ions from the plasma are driven into the target object surfaces from all sides simultaneously without the need for manipulation of the target object. Repetitive pulses of high voltage, typically 20 kilovolts or higher, causes the ions to be driven deeply into the target. The plasma may be formed of a neutral gas introduced into the evacuated chamber and ionized therein with ionizing radiation so that a constant source of plasma is provided which surrounds the target object during the implantation process. Significant increases in the surface hardness and wear characteristics of various materials are obtained with ion implantation in this manner.

  3. Method and apparatus for plasma source ion implantation

    DOEpatents

    Conrad, J.R.

    1988-08-16

    Ion implantation into surfaces of three-dimensional targets is achieved by forming an ionized plasma about the target within an enclosing chamber and applying a pulse of high voltage between the target and the conductive walls of the chamber. Ions from the plasma are driven into the target object surfaces from all sides simultaneously without the need for manipulation of the target object. Repetitive pulses of high voltage, typically 20 kilovolts or higher, causes the ions to be driven deeply into the target. The plasma may be formed of a neutral gas introduced into the evacuated chamber and ionized therein with ionizing radiation so that a constant source of plasma is provided which surrounds the target object during the implantation process. Significant increases in the surface hardness and wear characteristics of various materials are obtained with ion implantation in this manner. 7 figs.

  4. Ion Flux Characterization of H2 and D2 Plasmas Produced by an ECR Plasma Source

    NASA Astrophysics Data System (ADS)

    Kaiser, Eric; Capece, Angela; Roszell, John; Skinner, Charles; Koel, Bruce

    2013-10-01

    The use of lithium-conditioned plasma facing components in tokamaks has been shown to improve plasma confinement through a reduction in hydrogen recycling. Surface science techniques are being applied to probe the interactions between lithiated PFC's and H/D plasmas. A TectraTM Gen 2 plasma source has been commissioned that utilizes electron cyclotron resonance to produce a plasma discharge inside a vacuum test chamber and can produce ion fluxes similar to those typically seen in tokamaks. This source will be utilized to study H/D uptake by lithium films on Mo substrates as a precursor to NSTX-U experiments. In this work we report on the characterization of this source as a first step in its use in surface analysis studies. The source is operated in H2 and D2 gases and the subsequent ion flux of the plasma is measured by a Faraday Cup. Ion flux measurements are presented in a range of gas pressures and grid voltages up to 2 kV. Science Undergraduate Laboratory Internship funded by Department of Energy.

  5. Nitrogen Source-Dependent Capsule Induction in Human-Pathogenic Cryptococcus Species

    PubMed Central

    Frazzitta, Aubrey E.; Vora, Haily; Price, Michael S.; Tenor, Jennifer L.; Betancourt-Quiroz, Marisol; Toffaletti, Dena L.; Cheng, Nan

    2013-01-01

    Cryptococcus neoformans and C. gattii cause meningoencephalitis and are an increasing human health threat. These pathogenic Cryptococcus species are neurotropic and persist in the cerebrospinal fluid (CSF) of the mammalian host during infection. In order to survive in the host, pathogenic fungi must procure nutrients, such as carbon and nitrogen, from the CSF. To enhance our understanding of nutrient acquisition during central nervous system infection by Cryptococcus species, we examined the utilization of nitrogen sources available in CSF. We screened for the growth and capsule production of 817 global environmental and clinical isolates on various sources of nitrogen. Both environmental and clinical strains grew robustly on uric acid, Casamino Acids, creatinine, and asparagine as sole nitrogen sources. Urea induced the greatest magnitude of capsule induction. This induction was greater in Cryptococcus gattii than in C. neoformans. We confirmed the ability of nonpreferred nitrogen sources to increase capsule production in pathogenic species of Cryptococcus. Since urea is metabolized to ammonia and CO2 (a known signal for capsule induction), we examined urea metabolism mutants for their transcriptional response to urea regarding capsule production. The transcriptional profile of C. neoformans under urea-supplemented conditions revealed both similar and unique responses to other capsule-inducing conditions, including both intra- and extracellular urea utilization. As one of the most abundant nitrogen sources in the CSF, the ability of Cryptococcus to import urea and induce capsule production may substantially aid this yeast's survival and propagation in the host. PMID:23975889

  6. Initial Results from the ASTRAL Helicon Plasma Source

    NASA Astrophysics Data System (ADS)

    Boivin, Robert

    2003-10-01

    The Auburn Steady sTate Research fAciLity (ASTRAL) is 2 m long Helicon source designed to investigate basic plasma and space plasma processes. The device produces a plasma with the following parameters: ne = 10^10 to 10^13 cm-3, Te = 2 to 20 eV and Ti = 0.03 to 0.1 eV. A series of large coils produce an axial magnetic field up to 1.2 kGauss. Operating pressure varies from 0.1 to 100 mTorr and any gas can be used for the discharge. A fractional helix antenna is used to introduce up to 2 kWatt of RF power into the plasma through a matching pi circuit. A number of diagnostics are presently installed on the plasma device. A RF compensated Langmuir probe is used to measure electron temperature and plasma density. A 0.33 m Criss-Cross Scanning monochromator with a high performance CCD camera is used to measure impurity concentration and to develop novel spectroscopy diagnostic. A diode laser based Laser Induced Fluorescence (LIF) is used to obtain ion temperature and ion drift in the plasma column. A microwave interferometer is also used to calibrate the Langmuir probe. First experimental results associated with this new facility are presented.

  7. Lead concentrations and isotope ratios in street dust determined by electrothermal atomic absorption spectrometry and inductively coupled plasma mass spectrometry.

    PubMed

    Nageotte, S M; Day, J P

    1998-01-01

    A major source of environmental lead, particularly in urban areas, has been from the combustion of leaded petrol. Street dust has previously been used to assess urban lead contamination, and the dust itself can also be a potential source of lead ingestion, particularly to children. The progressive reduction of lead in petrol, in recent years, would be expected to have been reflected in a reduction of lead in urban dust. We have tested this hypothesis by repeating an earlier survey of Manchester street dust and carrying out a comparable survey in Paris. Samples were collected from streets and parks, lead was extracted by digestion with concentrated nitric acid and determined by electrothermal atomic absorption spectrometry. Lead isotope ratios were measured by inductively coupled plasma mass spectrometry. Results for Manchester show that lead concentrations have fallen by about 40% (street dust averages, 941 micrograms g-1 (ppm) in 1975 down to 569 ppm in 1997). In Paris, the lead levels in street dust are much higher and significant differences were observed between types of street (not seen in Manchester). Additionally, lead levels in parks were much lower than in Manchester. Samples collected under the Eiffel Tower had very high concentrations and lead isotope ratios showed that this was unlikely to be fallout from motor vehicles but could be due to the paint used on the tower. Isotope ratios measurements also revealed that lead additives used in France and the UK come from different sources.

  8. Hollow cathode plasma source for active spacecraft charge control

    NASA Astrophysics Data System (ADS)

    Deininger, William D.; Aston, Graeme; Pless, Lewis C.

    1987-06-01

    A prototype plasma source spacecraft discharge device has been developed to control overall and differential spacecraft surface charging. The plasma source is based on a unique hollow cathode discharge, where the plasma generation process is contained completely within the cathode. This device can be operated on argon, krypton, or xenon and has a rapid cold start time of less than 4 s. The discharge system design includes a spacecraft-discharge/net-charge sensing circuit which provides the ability to measure the polarity, magnitude, pulse shape, and time duration of a discharging event. Ion currents of up to 325 microA and electron currents ranging from 0.02 to 6.0 A have been extracted from the device. In addition, the spacecraft discharge device successfully discharged capacitively biased plates, from as high as + or - 2500 V, to ground potential, and discharged and clamped actively biased plates at +5 V with respect to ground potential during ground simulation testing.

  9. Invitation to the World of the Plasma for Light Source 3.Light Source Measurement 3.1 Laser Diagnostics of Plasmas for Light Sources

    NASA Astrophysics Data System (ADS)

    Motomura, Hideki; Jinno, Masafumi

    Examples and basic theories of various methods of laser diagnostics of plasmas for light sources are introduced. Most introduced papers were presented at International Symposium on the Science and Technology of Light Sources (LS), which is the only international symposium on the science and technology of light sources.

  10. Modeling of negative ion transport in a plasma source (invited)

    NASA Astrophysics Data System (ADS)

    Riz, David; Paméla, Jérôme

    1998-02-01

    A code called NIETZSCHE has been developed to simulate the negative ion transport in a plasma source, from their birth place to the extraction holes. The H-/D- trajectory is calculated by numerically solving the 3D motion equation, while the atomic processes of destruction, of elastic collision with H+/D+ and of charge exchange with H0/D0 are handled at each time step by a Monte Carlo procedure. This code can be used to calculate the extraction probability of a negative ion produced at any location inside the source. Calculations performed with NIETZSCHE have been allowed to explain, either quantitatively or qualitatively, several phenomena observed in negative ion sources, such as the isotopic H-/D- effect, and the influence of the plasma grid bias or of the magnetic filter on the negative ion extraction. The code has also shown that, in the type of sources contemplated for ITER, which operate at large arc power densities (>1 W cm-3), negative ions can reach the extraction region provided they are produced at a distance lower than 2 cm from the plasma grid in the case of volume production (dissociative attachment processes), or if they are produced at the plasma grid surface, in the vicinity of the extraction holes.

  11. Modeling of negative ion transport in a plasma source

    NASA Astrophysics Data System (ADS)

    Riz, David; Paméla, Jérôme

    1998-08-01

    A code called NIETZSCHE has been developed to simulate the negative ion transport in a plasma source, from their birth place to the extraction holes. The ion trajectory is calculated by numerically solving the 3-D motion equation, while the atomic processes of destruction, of elastic collision H-/H+ and of charge exchange H-/H0 are handled at each time step by a Monte-Carlo procedure. This code can be used to calculate the extraction probability of a negative ion produced at any location inside the source. Calculations performed with NIETZSCHE have allowed to explain, either quantitatively or qualitatively, several phenomena observed in negative ion sources, such as the isotopic H-/D- effect, and the influence of the plasma grid bias or of the magnetic filter on the negative ion extraction. The code has also shown that in the type of sources contemplated for ITER, which operate at large arc power densities (>1 W cm-3), negative ions can reach the extraction region provided if they are produced at a distance lower than 2 cm from the plasma grid in the case of «volume production» (dissociative attachment processes), or if they are produced at the plasma grid surface, in the vicinity of the extraction holes.

  12. Compact surface plasma H- ion source with geometrical focusing

    NASA Astrophysics Data System (ADS)

    Dudnikov, V.; Dudnikova, G.

    2016-02-01

    Factors limiting operating lifetime of a Compact Surface Plasma Sources (CSPS) are analyzed and possible treatments for lifetime enhancement are considered. Increased cooling permeate increased discharge power and increased beam intensity and duty factor. A design of an advanced CSPS with geometrical focusing of H- flux is presented.

  13. A new large area lanthanum hexaboride plasma source

    NASA Astrophysics Data System (ADS)

    Cooper, C. M.; Gekelman, W.; Pribyl, P.; Lucky, Z.

    2010-08-01

    A new 18×18 cm2 active area lanthanum hexaboride (LaB6) plasma source for use in a dc discharge has been developed at UCLA. The cathode consists of four tiled LaB6 pieces indirectly heated to electron emission (1750 °C) by a graphite heater. A molybdenum mesh anode 33 cm in front of the LaB6 accelerates the electrons, ionizing a fill gas to create a 20×20 cm2 nearly square plasma. The source is run in pulsed operation with the anode biased up to +400 V dc with respect to the cathode for up to 100 ms at a 1 Hz repetition rate. Both the cathode and anode "float" electrically with respect to the chamber walls. The source is placed in a toroidal chamber 2 m wide and 3 m tall with a major radius of 5 m. Toroidal and vertical magnetic fields confine the current-free plasma which follows the field in a helix. The plasma starts on the bottom of the machine and spirals around it up to four times (120 m) and can be configured to terminate either on the top wall or on the neutral gas itself. The source typically operates with a discharge current up to 250 A in helium making plasmas with Te<30 eV, Ti<16 eV, and ne<3×1013 cm-3 in a background field of 100 Gplasma with 0.1<β<1.

  14. A new large area lanthanum hexaboride plasma source

    SciTech Connect

    Cooper, C. M.; Gekelman, W.; Pribyl, P.; Lucky, Z.

    2010-08-15

    A new 18x18 cm{sup 2} active area lanthanum hexaboride (LaB{sub 6}) plasma source for use in a dc discharge has been developed at UCLA. The cathode consists of four tiled LaB{sub 6} pieces indirectly heated to electron emission (1750 deg. C) by a graphite heater. A molybdenum mesh anode 33 cm in front of the LaB{sub 6} accelerates the electrons, ionizing a fill gas to create a 20x20 cm{sup 2} nearly square plasma. The source is run in pulsed operation with the anode biased up to +400 V dc with respect to the cathode for up to 100 ms at a 1 Hz repetition rate. Both the cathode and anode ''float'' electrically with respect to the chamber walls. The source is placed in a toroidal chamber 2 m wide and 3 m tall with a major radius of 5 m. Toroidal and vertical magnetic fields confine the current-free plasma which follows the field in a helix. The plasma starts on the bottom of the machine and spirals around it up to four times (120 m) and can be configured to terminate either on the top wall or on the neutral gas itself. The source typically operates with a discharge current up to 250 A in helium making plasmas with T{sub e}<30 eV, T{sub i}<16 eV, and n{sub e}<3x10{sup 13} cm{sup -3} in a background field of 100 Gplasma with 0.1<{beta}<1.

  15. Plasma emission spectroscopy for operating and developing the Spallation Neutron Source (SNS) H- ion sources

    SciTech Connect

    Han, Baoxi; Welton, Robert F; Murray Jr, S N; Pennisi, Terry R; Santana, Manuel; Stockli, Martin P

    2014-01-01

    An RF-driven, Cs-enhanced H- ion source feeds the SNS accelerator with a high current (typically >50 mA), ~1.0 ms pulsed beam at 60 Hz. To achieve the persistent high current beam for several weeks long service cycles, each newly installed ion source undergoes a rigorous conditioning and cesiation processes. Plasma conditioning outgases the system and sputter-cleans the ion conversion surfaces. A cesiation process immediately following the plasma conditioning releases Cs to provide coverage on the ion conversion surfaces. The effectiveness of the ion source conditioning and cesiation is monitored with plasma emission spectroscopy using a high-sensitivity optical spectrometer. Plasma emission spectroscopy is also used to provide a mean for diagnosing and confirming a failure of the insulating coating of the ion source RF antenna which is immersed in the plasma. Emissions of composition elements of the antenna coating material, Na emission being the most significant, drastically elevate to signal a failure when it happens. Plasma spectra of the developmental ion source with an AlN chamber and an external RF antenna are also briefly discussed.

  16. Determination of rare earth elements in tomato plants by inductively coupled plasma mass spectrometry techniques.

    PubMed

    Spalla, S; Baffi, C; Barbante, C; Turetta, C; Turretta, C; Cozzi, G; Beone, G M; Bettinelli, M

    2009-10-30

    In recent years identification of the geographical origin of food has grown more important as consumers have become interested in knowing the provenance of the food that they purchase and eat. Certification schemes and labels have thus been developed to protect consumers and genuine producers from the improper use of popular brand names or renowned geographical origins. As the tomato is one of the major components of what is considered to be the healthy Mediterranean diet, it is important to be able to determine the geographical origin of tomatoes and tomato-based products such as tomato sauce. The aim of this work is to develop an analytical method to determine rare earth elements (RRE) for the control of the geographic origin of tomatoes. The content of REE in tomato plant samples collected from an agricultural area in Piacenza, Italy, was determined, using four different digestion procedures with and without HF. Microwave dissolution with HNO3 + H2O2 proved to be the most suitable digestion procedure. Inductively coupled plasma quadrupole mass spectrometry (ICPQMS) and inductively coupled plasma sector field plasma mass spectrometry (ICPSFMS) instruments, both coupled with a desolvation system, were used to determine the REE in tomato plants in two different laboratories. A matched calibration curve method was used for the quantification of the analytes. The detection limits (MDLs) of the method ranged from 0.03 ng g(-1) for Ho, Tm, and Lu to 2 ng g(-1) for La and Ce. The precision, in terms of relative standard deviation on six replicates, was good, with values ranging, on average, from 6.0% for LREE (light rare earth elements) to 16.5% for HREE (heavy rare earth elements). These detection limits allowed the determination of the very low concentrations of REE present in tomato berries. For the concentrations of REE in tomato plants, the following trend was observed: roots > leaves > stems > berries.

  17. Etching studies of silica glasses in SF{sub 6}/Ar inductively coupled plasmas: Implications for microfluidic devices fabrication

    SciTech Connect

    Lallement, L.; Gosse, C.; Cardinaud, C.; Peignon-Fernandez, M.-C.; Rhallabi, A.

    2010-03-15

    To fabricate microlaboratories, commercially available silica glasses represent a good alternative to the expensive quartz or fused silica substrates. Therefore, the authors have here investigated the behavior of four of them--Vycor, Pyrex, D263, and AF45--in SF{sub 6} and SF{sub 6}/Ar inductively coupled plasmas. Using Vycor, a material close to pure SiO{sub 2}, as a reference, they demonstrated that the etch rate negatively correlates with the global content in metallic oxides. However, no such clear trend was found for the surface roughness and they hypothesize that the large asperities (>500 nm) sometimes observed might be due to local variation in the glass surface composition. Furthermore, investigations on the influence of the plasma conditions (i.e., source power, dc self-bias, gas mixture, and pressure) on the etch rate, surface chemistry, and surface morphology, as well as positive ion current and fluorine concentration measurements, enable them to unravel an ion enhanced chemical etching mechanism, where stronger ion assistance is needed when more metallic oxides are present. By increasing the ion to neutral flux ratio, they consequently could, for all the materials, reduce the surface roughness to less than 5 nm while maintaining etch rates around 150 nm/min. These conditions have further been used to optimize pattern transfer experiments.

  18. Three-dimensional modeling of a negative ion source with a magnetic filter: impact of biasing the plasma electrode on the plasma asymmetry

    NASA Astrophysics Data System (ADS)

    Fubiani, G.; Boeuf, J. P.

    2015-10-01

    The effect on the plasma characteristics of biasing positively the plasma electrode (PE) in negative ion sources with a magnetic filter is analysed using a 3D particle-in-cell model with Monte-Carlo collisions (PIC-MCC). We specialize to the one driver (i.e. one inductively coupled radio-frequency discharge) BATMAN negative ion source and the 4-drivers (large volume) ELISE device. Both are ITER prototype high power tandem-type negative ion sources developed for the neutral beam injector (NBI) system. The plasma is generated in the driver and diffuses inside the second chamber which is magnetized. Asymmetric plasma profiles originate from the formation of an electric field transverse to the electron current flowing through the magnetic filter (Hall effect). The model shows that the importance of the asymmetry increases with the PE bias potential, i.e. with the electron flow from the driver to the extraction region and depends on the shape of the magnetic filter field. We find that although the plasma density and potential profiles may be more or less asymmetric depending on the filter field configuration, the electron current to the plasma grid is always strongly asymmetric.

  19. Deactivation of lipopolysaccharide by Ar and H2 inductively coupled low-pressure plasma

    NASA Astrophysics Data System (ADS)

    Bartis, E. A. J.; Barrett, C.; Chung, T.-Y.; Ning, N.; Chu, J.-W.; Graves, D. B.; Seog, J.; Oehrlein, G. S.

    2014-01-01

    Using an inductively coupled plasma system, we study the effects of direct plasma, plasma-generated high-energy photons in the ultraviolet and vacuum ultraviolet (UV/VUV), and radical treatments on lipopolysaccharide (LPS). LPS is a biomolecule found in the outer membrane of Gram-negative bacteria and a potent stimulator of the immune system composed of polysaccharide and lipid A, which contains six aliphatic chains. LPS film thickness spun on silicon was monitored by ellipsometry while the surface chemistry was characterized before and after treatments by x-ray photoelectron spectroscopy (XPS). Additionally, biological activity was measured using an enzyme-linked immunosorbent assay under (a) a sensitive regime (sub-µM concentrations of LPS) and (b) a bulk regime (above µM concentrations of LPS) after plasma treatments. Direct plasma treatment causes rapid etching and deactivation of LPS in both Ar and H2 feed gases. To examine the effect of UV/VUV photons, a long-pass filter with a cut-off wavelength of 112 nm was placed over the sample. H2 UV/VUV treatment causes material removal and deactivation due to atomic and molecular UV/VUV emission while Ar UV/VUV treatment shows minimal effects as Ar plasma does not emit UV/VUV photons in the transmitted wavelength range explored. Interestingly, radical treatments remove negligible material but cause deactivation. Based on the amphiphilic structure of LPS, we expect a lipid A rich surface layer to form at the air-water interface during sample preparation with polysaccharide layers underneath. XPS shows that H2 plasma treatment under direct and UV/VUV conditions causes oxygen depletion through removal of C-O and O-C = O bonds in the films, which does not occur in Ar treatments. Damage to these groups can remove aliphatic chains that contribute to the pyrogenicity of LPS. Radical treatments from both Ar and H2 plasmas remove aliphatic carbon from the near-surface, demonstrating the important role of neutral species.

  20. Large-Area Permanent-Magnet ECR Plasma Source

    NASA Technical Reports Server (NTRS)

    Foster, John E.

    2007-01-01

    A 40-cm-diameter plasma device has been developed as a source of ions for material-processing and ion-thruster applications. Like the device described in the immediately preceding article, this device utilizes electron cyclotron resonance (ECR) excited by microwave power in a magnetic field to generate a plasma in an electrodeless (noncontact) manner and without need for an electrically insulating, microwave-transmissive window at the source. Hence, this device offers the same advantages of electrodeless, windowless design - low contamination and long operational life. The device generates a uniform, high-density plasma capable of sustaining uniform ion-current densities at its exit plane while operating at low pressure [<10(exp -4) torr (less than about 1.3 10(exp -2) Pa)] and input power <200 W at a frequency of 2.45 GHz. Though the prototype model operates at 2.45 GHz, operation at higher frequencies can be achieved by straightforward modification to the input microwave waveguide. Higher frequency operation may be desirable in those applications that require even higher background plasma densities. In the design of this ECR plasma source, there are no cumbersome, power-hungry electromagnets. The magnetic field in this device is generated by a permanent-magnet circuit that is optimized to generate resonance surfaces. The microwave power is injected on the centerline of the device. The resulting discharge plasma jumps into a "high mode" when the input power rises above 150 W. This mode is associated with elevated plasma density and high uniformity. The large area and uniformity of the plasma and the low operating pressure are well suited for such material-processing applications as etching and deposition on large silicon wafers. The high exit-plane ion-current density makes it possible to attain a high rate of etching or deposition. The plasma potential is <3 V low enough that there is little likelihood of sputtering, which, in plasma processing, is undesired

  1. Effect of low-damage inductively coupled plasma on shallow nitrogen-vacancy centers in diamond

    SciTech Connect

    Fávaro de Oliveira, Felipe; Momenzadeh, S. Ali; Wang, Ya; Denisenko, Andrej; Konuma, Mitsuharu; Markham, Matthew; Edmonds, Andrew M.; Wrachtrup, Jörg

    2015-08-17

    Near-surface nitrogen-vacancy (NV) centers in diamond have been successfully employed as atomic-sized magnetic field sensors for external spins over the last years. A key challenge is still to develop a method to bring NV centers at nanometer proximity to the diamond surface while preserving their optical and spin properties. To that aim we present a method of controlled diamond etching with nanometric precision using an oxygen inductively coupled plasma process. Importantly, no traces of plasma-induced damages to the etched surface could be detected by X-ray photoelectron spectroscopy and confocal photoluminescence microscopy techniques. In addition, by profiling the depth of NV centers created by 5.0 keV of nitrogen implantation energy, no plasma-induced quenching in their fluorescence could be observed. Moreover, the developed etching process allowed even the channeling tail in their depth distribution to be resolved. Furthermore, treating a {sup 12}C isotopically purified diamond revealed a threefold increase in T{sub 2} times for NV centers with <4 nm of depth (measured by nuclear magnetic resonance signal from protons at the diamond surface) in comparison to the initial oxygen-terminated surface.

  2. Surface roughening of ground fused silica processed by atmospheric inductively coupled plasma

    NASA Astrophysics Data System (ADS)

    Xin, Qiang; Li, Na; Wang, Jun; Wang, Bo; Li, Guo; Ding, Fei; Jin, Huiliang

    2015-06-01

    Subsurface damage (SSD) is a defect that is inevitably induced during mechanical processes, such as grinding and polishing. This defect dramatically reduces the mechanical strength and the laser damage thresholds of optical elements. Compared with traditional mechanical machining, atmospheric pressure plasma processing (APPP) is a relatively novel technology that induces almost no SSD during the processing of silica-based optical materials. In this paper, a form of APPP, inductively coupled plasma (ICP), is used to process fused silica substrates with fluorocarbon precursor under atmospheric pressure. The surface morphology evolution of ICP-processed substrates was observed and characterized by confocal laser scanning microscope (CLSM), field emission scanning electron microscope (SEM), and atomic force microscopy (AFM). The results show that the roughness evolves with the etching depth, and the roughness evolution is a single-peaked curve. This curve results from the opening and the coalescing of surface cracks and fractures. The coalescence procedure of these microstructures was simulated with two common etched pits on a polished fused silica surface. Understanding the roughness evolution of plasma-processed surface might be helpful in optimizing the optical fabrication chain that contains APPP.

  3. Fast, hot electron production and ion acceleration in a helicon inductive plasma

    NASA Astrophysics Data System (ADS)

    Sung, Yung-Ta; Li, Yan; Scharer, John E.

    2016-09-01

    A large, time-averaged, double layer-like plasma potential drop of 80 V over several hundred Debye lengths has been observed in the magnetic expansion region on the Madison Helicon eXperiment. It is operated in an inductive mode at 900 W and low argon operating pressures (0.12-0.20 mTorr) in the collisionless regime. The plasma space potential drop is due to the formation of a double layer-like structure in the magnetic expansion region and is much higher than the potential drop caused by a Boltzmann expansion. With the plasma potential drop, a locally negative potential ion hole region at lower pressures with a higher electron density than ion density has been observed just the downstream of the potential drop region. Two-temperature Maxwellian electron distributions with a warm ( T e ≈ 15 eV) and bulk ( T e ≈ 5 eV) components are observed just upstream of the double layer validated through a RF compensated Langmuir probe and an optical emission spectroscopy (OES) diagnostics. In the expansion chamber downstream of the double layer-like potential drop, a single warm ( T e ≈ 15 eV) Maxwellian electron distribution is observed via both the Langmuir probe and OES diagnostics. Ion beam energies of 65 eV are also observed downstream of the potential drop.

  4. Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Cunge, G.; Darnon, M.; Dubois, J.; Bezard, P.; Mourey, O.; Petit-Etienne, C.; Vallier, L.; Despiau-Pujo, E.; Sadeghi, N.

    2016-02-01

    Several issues associated with plasma etching of high aspect ratio structures originate from the ions' bombardment of the sidewalls of the feature. The off normal angle incident ions are primarily due to their temperature at the sheath edge and possibly to charging effects. We have measured the ion velocity distribution function (IVDF) at the wafer surface in an industrial inductively coupled plasma reactor by using multigrid retarding field analyzers (RFA) in front of which we place 400 μm thick capillary plates with holes of 25, 50, and 100 μm diameters. The RFA then probes IVDF at the exit of the holes with Aspect Ratios (AR) of 16, 8, and 4, respectively. The results show that the ion flux dramatically drops with the increase in AR. By comparing the measured IVDF with an analytical model, we concluded that the ion temperature is 0.27 eV in our plasma conditions. The charging effects are also observed and are shown to significantly reduce the ion energy at the bottom of the feature but only with a "minor" effect on the ion flux and the shape of the IVDF.

  5. An all solid state pulse power source for high PRF induction accelerators

    SciTech Connect

    Kirbie, H., LLNL

    1998-06-01

    Researchers at the Lawrence Livermore National Laboratory (LLNL) are developing a flexible, all solid-state pulsed power source that will enable an induction accelerator to produce mulitkiloampere electron beams at a maximum pulse repetition frequency (prf) of 2 MHz. The prototype source consists of three, 15-kV, 4.8-kA solid-state modulators stacked in an induction adder configuration. Each modulator contains over 1300 field-effect transistors (FETs) that quickly connect and disconnect four banks of energy storage capacitors to a magnetic induction core. The FETs are commanded on and off by an optical signal that determines the duration of the accelerating pulse. Further electronic circuitry is provided that resets the magnetic cores in each modulator immediately after the accelerating pulse. The system produces bursts of five or more pulses with an adjustable pulse width that ranges from 200 ns to 2 {micro}s The pulse duty factor within a burst can be as high as 25% while still allowing time for the induction core to reset. The solid-state modulator described above is called ARM-II and is named for the Advanced Radiographic Machine (ARM)-a powerful radiographic accelerator that will be the principal diagnostic device for the future Advanced Hydrotest Facility (AHF).

  6. Plasma phenomenology in astrophysical systems: Radio-sources and jets

    SciTech Connect

    Montani, Giovanni; Petitta, Jacopo

    2014-06-15

    We review the plasma phenomenology in the astrophysical sources which show appreciable radio emissions, namely Radio-Jets from Pulsars, Microquasars, Quasars, and Radio-Active Galaxies. A description of their basic features is presented, then we discuss in some details the links between their morphology and the mechanisms that lead to the different radio-emissions, investigating especially the role played by the plasma configurations surrounding compact objects (Neutron Stars, Black Holes). For the sake of completeness, we briefly mention observational techniques and detectors, whose structure set them apart from other astrophysical instruments. The fundamental ideas concerning angular momentum transport across plasma accretion disks—together with the disk-source-jet coupling problem—are discussed, by stressing their successes and their shortcomings. An alternative scenario is then inferred, based on a parallelism between astrophysical and laboratory plasma configurations, where small-scale structures can be found. We will focus our attention on the morphology of the radio-jets, on their coupling with the accretion disks and on the possible triggering phenomena, viewed as profiles of plasma instabilities.

  7. Active plasma source formation in the MAP diode

    SciTech Connect

    Lamppa, K.P.; Stinnett, R.W.; Renk, T.J.

    1995-07-01

    The Ion Beam Surface Treatment (IBEST) program is exploring using ion beams to treat the surface of a wide variety of materials. These experiments have shown that improved corrosion resistance, surface hardening, grain size modification, polishing and surface cleaning can all be achieved using a pulsed 0.4-0.8 MeV ion beam delivering 1-10 J/cm{sup 2}. The Magnetically-confined Anode Plasma (MAP) diode, developed at Cornell University, produces an active plasma which can be used to treat the surfaces of materials. The diode consists of a fast puff valve as the source of gas to produce the desired ions and two capacitively driven B-fields. A slow magnetic field is used for electron insulation and a fast field is used to both ionize the puffed gas and to position the plasma in the proper spatial location in the anode prior to the accelerator pulse. The relative timing between subsystems is an important factor in the effective production of the active plasma source for the MAP diode system. The MAP diode has been characterized using a Langmuir probe to measure plasma arrival times at the anode annulus for hydrogen gas. This data was then used to determine the optimum operating point for the MAP diode on RHEPP-1 accelerator shots. Operation of the MAP diode system to produce an ion beam of 500 kV, 12 kA with 40% efficiency (measured at the diode) has been demonstrated.

  8. Plasma and Ion Sources in Large Area Coatings: A Review

    SciTech Connect

    Anders, Andre

    2005-02-28

    Efficient deposition of high-quality coatings often requires controlled application of excited or ionized particles. These particles are either condensing (film-forming) or assisting by providing energy and momentum to the film growth process, resulting in densification, sputtering/etching, modification of stress, roughness, texture, etc. In this review, the technical means are surveyed enabling large area application of ions and plasmas, with ion energies ranging from a few eV to a few keV. Both semiconductortype large area (single wafer or batch processing with {approx} 1000 cm{sup 2}) and in-line web and glass-coating-type large area (> 10{sup 7} m{sup 2} annually) are considered. Characteristics and differences between plasma and ion sources are explained. The latter include gridded and gridless sources. Many examples are given, including sources based on DC, RF, and microwave discharges, some with special geometries like hollow cathodes and E x B configurations.

  9. Small plasma focus as neutron pulsed source for nuclides identification

    SciTech Connect

    Milanese, M.; Moroso, R.; Barbaglia, M.; Niedbalski, J.; Mayer, R.; Castillo, F.

    2013-10-15

    In this paper, we present preliminary results on the feasibility of employing a low energy (2 kJ, 31 kV) plasma focus device as a portable source of pulsed neutron beams (2.45 MeV) generated by nuclear fusion reactions D-D, for the “in situ” analysis of substances by nuclear activation. This source has the relevant advantage of being pulsed at requirement, transportable, not permanently radioactive, without radioactive waste, cheap, among others. We prove the feasibility of using this source showing several spectra of the characteristic emission line for manganese, gold, lead, and silver.

  10. Betatron Radiation from a Beam Driven Plasma Source

    SciTech Connect

    Litos, M.; Corde, S.; /SLAC

    2012-08-13

    Photons produced by the betatron oscillation of electrons in a beam-driven plasma wake provide a uniquely intense and high-energy source of hard X-rays and gamma rays. This betatron radiation is interesting not only for its high intensity and spectral characteristics, but also because it can be used as a diagnostic for beam matching into the plasma, which is critical for maximizing the energy extraction efficiency of a plasma accelerator stage. At SLAC, gamma ray detection devices have been installed at the dump area of the FACET beamline where the betatron radiation from the plasma source used in the E200 plasma wakefield acceleration experiment may be observed. The ultra-dense, high-energy beam at FACET (2 x 10{sup 10} electrons, 20 x 20 {micro}m{sup 2} spot, 20-100 {micro}m length, 20 GeV energy) when sent into a plasma source with a nominal density of {approx} 1 x 10{sup 17} cm{sup -3} will generate synchrotron-like spectra with critical energies well into the tens of MeV. The intensity of the radiation can be increased by introducing a radial offset to the centroid of the witness bunch, which may be achieved at FACET through the use of a transverse deflecting RF cavity. The E200 gamma ray detector has two main components: a 30 x 35 cm{sup 2} phosphorescent screen for observing the transverse extent of the radiation, and a sampling electromagnetic calorimeter outfitted with photodiodes for measuring the on-axis spectrum. To estimate the spectrum, the observed intensity patterns across the calorimeter are fit with a Gaussian-integrated synchrotron spectrum and compared to simulations. Results and observations from the first FACET user run (April-June 2012) are presented.

  11. Betatron radiation from a beam driven plasma source

    NASA Astrophysics Data System (ADS)

    Litos, M.; Corde, S.

    2012-12-01

    Photons produced by the betatron oscillation of electrons in a beam-driven plasma wake provide a uniquely intense and high-energy source of hard X-rays and gamma rays. This betatron radiation is interesting not only for its high intensity and spectral characteristics, but also because it can be used as a diagnostic for beam matching into the plasma, which is critical for maximizing the energy extraction efficiency of a plasma accelerator stage. At SLAC, gamma ray detection devices have been installed at the dump area of the FACET beamline where the betatron radiation from the plasma source used in the E200 plasma wakefield acceleration experiment may be observed. The ultra-dense, high-energy beam at FACET (2 × 1010 electrons, 20 × 20μm2 spot, 20 - 100μm length, 20GeV energy) when sent into a plasma source with a nominal density of ˜ 1 × 1017 cm-3 will generate synchrotron-like spectra with critical energies well into the tens of MeV. The intensity of the radiation can be increased by introducing a radial offset to the centroid of the witness bunch, which may be achieved at FACET through the use of a transverse deflecting RF cavity. The E200 gamma ray detector has two main components: a 30 × 35cm2 phosphorescent screen for observing the transverse extent of the radiation, and a sampling electromagnetic calorimeter outfitted with photodiodes for measuring the on-axis spectrum. To estimate the spectrum, the observed intensity patterns across the calorimeter are fit with a Gaussian-integrated synchrotron spectrum and compared to simulations. Results and observations from the first FACET user run (April-June 2012) are presented.

  12. Betatron radiation from a beam driven plasma source

    SciTech Connect

    Litos, M.; Corde, S.

    2012-12-21

    Photons produced by the betatron oscillation of electrons in a beam-driven plasma wake provide a uniquely intense and high-energy source of hard X-rays and gamma rays. This betatron radiation is interesting not only for its high intensity and spectral characteristics, but also because it can be used as a diagnostic for beam matching into the plasma, which is critical for maximizing the energy extraction efficiency of a plasma accelerator stage. At SLAC, gamma ray detection devices have been installed at the dump area of the FACET beamline where the betatron radiation from the plasma source used in the E200 plasma wakefield acceleration experiment may be observed. The ultra-dense, high-energy beam at FACET (2 Multiplication-Sign 10{sup 10} electrons, 20 Multiplication-Sign 20{mu}m{sup 2} spot, 20 - 100{mu}m length, 20GeV energy) when sent into a plasma source with a nominal density of {approx} 1 Multiplication-Sign 10{sup 17} cm{sup -3} will generate synchrotron-like spectra with critical energies well into the tens of MeV. The intensity of the radiation can be increased by introducing a radial offset to the centroid of the witness bunch, which may be achieved at FACET through the use of a transverse deflecting RF cavity. The E200 gamma ray detector has two main components: a 30 Multiplication-Sign 35cm{sup 2} phosphorescent screen for observing the transverse extent of the radiation, and a sampling electromagnetic calorimeter outfitted with photodiodes for measuring the on-axis spectrum. To estimate the spectrum, the observed intensity patterns across the calorimeter are fit with a Gaussian-integrated synchrotron spectrum and compared to simulations. Results and observations from the first FACET user run (April-June 2012) are presented.

  13. Tin LPP plasma control in the argon cusp source

    NASA Astrophysics Data System (ADS)

    McGeoch, Malcolm W.

    2016-03-01

    The argon cusp plasma has been introduced [1,2] for 500W class tin LPP exhaust control in view of its high power handling, predicted low tin back-scatter from a beam dump, and avoidance of hydrogen usage. The physics of tin ion control by a plasma is first discussed. Experimentally, cusp stability and exhaust disc geometry have previously been proved at full scale [2], the equivalent of 300W-500W usable EUV. Here we verify operation of the plasma barrier that maintains a high argon density next to the collector, for its protection, and a low density in the long path toward the intermediate focus, for efficiency. A pressure differential of 2Pa has been demonstrated in initial work. Other aspects of tin LPP plasma control by the cusp have now been demonstrated using tin ions from a low Hz 130mJ CO2 laser pulse onto a solid tin surface at the cusp center. Plasma is rejected at the <0.5% level at the collector mirror location using the cusp magnetic field alone. Plasma also is rejected using a low argon density (<1x1014cm-3). We have measured the tin ion flow pattern toward the large area annular beam dump. Scaling of the cusp design to match a specified exhaust power is discussed. In view of this work, argon cusp exhaust control appears to be very promising for 500W class tin LPP sources.

  14. Oscillating plasma bubbles. III. Internal electron sources and sinks

    SciTech Connect

    Stenzel, R. L.; Urrutia, J. M.

    2012-08-15

    An internal electron source has been used to neutralize ions injected from an ambient plasma into a spherical grid. The resultant plasma is termed a plasma 'bubble.' When the electron supply from the filament is reduced, the sheath inside the bubble becomes unstable. The plasma potential of the bubble oscillates near but below the ion plasma frequency. Different modes of oscillations have been observed as well as a subharmonic and multiple harmonics. The frequency increases with ion density and decreases with electron density. The peak amplitude occurs for an optimum current and the instability is quenched at large electron densities. The frequency also increases if Langmuir probes inside the bubble draw electrons. Allowing electrons from the ambient plasma to enter, the bubble changes the frequency dependence on grid voltage. It is concluded that the net space charge density in the sheath determines the oscillation frequency. It is suggested that the sheath instability is caused by ion inertia in an oscillating sheath electric field which is created by ion bunching.

  15. Locating and Quantifying Broadband Fan Sources Using In-Duct Microphones

    NASA Technical Reports Server (NTRS)

    Dougherty, Robert P.; Walker, Bruce E.; Sutliff, Daniel L.

    2010-01-01

    In-duct beamforming techniques have been developed for locating broadband noise sources on a low-speed fan and quantifying the acoustic power in the inlet and aft fan ducts. The NASA Glenn Research Center's Advanced Noise Control Fan was used as a test bed. Several of the blades were modified to provide a broadband source to evaluate the efficacy of the in-duct beamforming technique. Phased arrays consisting of rings and line arrays of microphones were employed. For the imaging, the data were mathematically resampled in the frame of reference of the rotating fan. For both the imaging and power measurement steps, array steering vectors were computed using annular duct modal expansions, selected subsets of the cross spectral matrix elements were used, and the DAMAS and CLEAN-SC deconvolution algorithms were applied.

  16. In-duct identification of a rotating sound source with high spatial resolution

    NASA Astrophysics Data System (ADS)

    Heo, Yong-Ho; Ih, Jeong-Guon; Bodén, Hans

    2015-11-01

    To understand and reduce the flow noise generation from in-duct fluid machines, it is necessary to identify the acoustic source characteristics precisely. In this work, a source identification technique, which can identify the strengths and positions of the major sound radiators in the source plane, is studied for an in-duct rotating source. A linear acoustic theory including the effects of evanescent modes and source rotation is formulated based on the modal summation method, which is the underlying theory for the inverse source reconstruction. A validation experiment is conducted on a duct system excited by a loudspeaker in static and rotating conditions, with two different speeds, in the absence of flow. Due to the source rotation, the measured pressure spectra reveal the Doppler effect, and the amount of frequency shift corresponds to the multiplication of the circumferential mode order and the rotation speed. Amplitudes of participating modes are estimated at the shifted frequencies in the stationary reference frame, and the modal amplitude set including the effect of source rotation is collected to investigate the source behavior in the rotating reference frame. By using the estimated modal amplitudes, the near-field pressure is re-calculated and compared with the measured pressure. The obtained maximum relative error is about -25 and -10 dB for rotation speeds at 300 and 600 rev/min, respectively. The spatial distribution of acoustic source parameters is restored from the estimated modal amplitude set. The result clearly shows that the position and magnitude of the main sound source can be identified with high spatial resolution in the rotating reference frame.

  17. A High-Intensity, RF Plasma-Sputter Negative Ion Source

    SciTech Connect

    Alton, G.D.; Bao, Y.; Cui, B.; Lohwasser, R.; Reed, C.A.; Zhang, T.

    1999-03-02

    A high-intensity, plasma-sputter negative-ion source based on the use of RF power for plasma generation has been developed that can be operated in either pulsed or dc modes. The source utilizes a high-Q, self-igniting, inductively coupled antenna system, operating at 80 MHz that has been optimized to generate Cs-seeded plasmas at low pressures (typically, <1 mTorr for Xe). The source is equipped with a 19-mm diameter spherical-sector cathode machined from the desired material. To date, the source has been utilized to generate dc negative-ion beams from a variety of species, including: C{sup {minus}}(610 {micro}A); F{sup {minus}}(100 {micro}A); Si{sup {minus}}(500 {micro}A); S{sup {minus}}(500 {micro}A); P{sup {minus}}(125 {micro}A); Cl{sup {minus}}(200 {micro}A); Ni{sup {minus}}(150 {micro}A); Cu{sup {minus}}(230 {micro}A); Ge{sup {minus}}(125 {micro}A); As{sup {minus}}(100 {micro}A); Se{sup {minus}}(200 {micro}A); Ag{sup {minus}}(70 {micro}A); Pt{sup {minus}}(125 {micro}A); Au{sup {minus}}(250 {micro}A). The normalized emittance {var_epsilon}{sub n} of the source at the 80% contour is: {var_epsilon}{sub n} = 7.5 mm.mrad.(MeV){sup 1/2}. The design principles of the source, operational parameters, ion optics, emittance and intensities for a number of negative-ion species will be presented in this report.

  18. The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays

    NASA Astrophysics Data System (ADS)

    Seon-Geun, Oh; Young-Jun, Lee; Jae-Hong, Jeon; Jong-Hyeon, Seo; Hee-Hwan, Choe

    2014-08-01

    Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software (COMSOLTM) to predict the effects of antenna configuration in a large area inductively coupled plasma (ICP) system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.

  19. Radionuclide detection by inductively coupled plasma mass spectrometry: A comparison of atomic and radiation detection method

    SciTech Connect

    Smith, M.R.; Wyse, E.J.; Koppenaal, D.W.

    1991-04-01

    Radionuclide detection by mass spectrometric techniques offers inherent advantages over conventional radiation detection methods. Since radionuclides decay at variable rates (half-lives) and via various nuclear transformations (i.e. emission of alpha, beta, and/or gamma radiation) their determination via radiation detection depends not only on decay systematics but also on detector technology. Radionuclide detection by direct atom measurement, however, is dependent only on technique sensitivity and is indifferent to decay mode. Evaluation of inductively coupled plasma mass spectrometry (ICP/MS) indicates this method to be superior conventional radiation detection techniques for many radionuclides. This work discusses factors which influence detection by both methods. Illustrative applications of ICP/MS to the ultra-trace determination of several radionuclides, including {sup 129}I, are presented. 20 refs., 6 figs., 1 tab.

  20. Single and Multi-Pulse Low-Energy Conical Theta Pinch Inductive Pulsed Plasma Thruster Performance

    NASA Technical Reports Server (NTRS)

    Hallock, A. K.; Martin, A. K.; Polzin, K. A.; Kimberlin, A. C.; Eskridge, R. H.

    2013-01-01

    Impulse bits produced by conical theta-pinch inductive pulsed plasma thrusters possessing cone angles of 20deg, 38deg, and 60deg, were quantified for 500J/pulse operation by direct measurement using a hanging-pendulum thrust stand. All three cone angles were tested in single-pulse mode, with the 38deg model producing the highest impulse bits at roughly 1 mN-s operating on both argon and xenon propellants. A capacitor charging system, assembled to support repetitively-pulsed thruster operation, permitted testing of the 38deg thruster at a repetition-rate of 5 Hz at power levels of 0.9, 1.6, and 2.5 kW. The average thrust measured during multiple-pulse operation exceeded the value obtained when the single-pulse impulse bit is multiplied by the repetition rate.

  1. Anisotropic Ta{sub 2}O{sub 5} waveguide etching using inductively coupled plasma etching

    SciTech Connect

    Muttalib, Muhammad Firdaus A. Chen, Ruiqi Y.; Pearce, Stuart J.; Charlton, Martin D. B.

    2014-07-01

    Smooth and vertical sidewall profiles are required to create low loss rib and ridge waveguides for integrated optical device and solid state laser applications. In this work, inductively coupled plasma (ICP) etching processes are developed to produce high quality low loss tantalum pentoxide (Ta{sub 2}O{sub 5}) waveguides. A mixture of C{sub 4}F{sub 8} and O{sub 2} gas are used in combination with chromium (Cr) hard mask for this purpose. In this paper, the authors make a detailed investigation of the etch process parameter window. Effects of process parameters such as ICP power, platen power, gas flow, and chamber pressure on etch rate and sidewall slope angle are investigated. Chamber pressure is found to be a particularly important factor, which can be used to tune the sidewall slope angle and so prevent undercut.

  2. Assessment of the analytical capabilities of inductively coupled plasma-mass spectrometry

    USGS Publications Warehouse

    Taylor, H.E.; Garbarino, J.R.

    1988-01-01

    A thorough assessment of the analytical capabilities of inductively coupled plasma-mass spectrometry was conducted for selected analytes of importance in water quality applications and hydrologic research. A multielement calibration curve technique was designed to produce accurate and precise results in analysis times of approximately one minute. The suite of elements included Al, As, B, Ba, Be, Cd, Co, Cr, Cu, Hg, Li, Mn, Mo, Ni, Pb, Se, Sr, V, and Zn. The effects of sample matrix composition on the accuracy of the determinations showed that matrix elements (such as Na, Ca, Mg, and K) that may be present in natural water samples at concentration levels greater than 50 mg/L resulted in as much as a 10% suppression in ion current for analyte elements. Operational detection limits are presented.

  3. Investigation of Asymmetries in Inductively Coupled Plasma Etching Reactors Using a 3-Dimensional Hybrid Model

    NASA Astrophysics Data System (ADS)

    Kushner, Mark J.; Grapperhaus, Michael J.

    1996-10-01

    Inductively Coupled Plasma (ICP) reactors have the potential for scaling to large area substrates while maintaining azimuthal symmetry or side-to-side uniformity across the wafer. Asymmetric etch properties in these devices have been attributed to transmission line properties of the coil, internal structures (such as wafer clamps) and non-uniform gas injection or pumping. To investigate the origins of asymmetric etch properties, a 3-dimensional hybrid model has been developed. The hybrid model contains electromagnetic, electric circuit, electron energy equation, and fluid modules. Continuity and momentum equations are solved in the fluid module along with Poisson's equation. We will discuss results for ion and radical flux uniformity to the substrate while varying the transmission line characteristics of the coil, symmetry of gas inlets/pumping, and internal structures. Comparisons will be made to expermental measurements of etch rates. ^*Work supported by SRC, NSF, ARPA/AFOSR and LAM Research.

  4. Stable isotope dilution analysis of hydrologic samples by inductively coupled plasma mass spectrometry

    USGS Publications Warehouse

    Garbarino, J.R.; Taylor, H.E.

    1987-01-01

    Inductively coupled plasma mass spectrometry is employed in the determination of Ni, Cu, Sr, Cd, Ba, Ti, and Pb in nonsaline, natural water samples by stable isotope dilution analysis. Hydrologic samples were directly analyzed without any unusual pretreatment. Interference effects related to overlapping isobars, formation of metal oxide and multiply charged ions, and matrix composition were identified and suitable methods of correction evaluated. A comparability study snowed that single-element isotope dilution analysis was only marginally better than sequential multielement isotope dilution analysis. Accuracy and precision of the single-element method were determined on the basis of results obtained for standard reference materials. The instrumental technique was shown to be ideally suited for programs associated with certification of standard reference materials.

  5. Analysis of iodine in food samples by inductively coupled plasma-mass spectrometry.

    PubMed

    Todorov, Todor I; Gray, Patrick J

    2016-01-01

    This work shows a method for the determination of iodine in a variety of food samples and reference materials using inductively coupled plasma-mass spectrometry (ICP-MS) following alkaline extraction. Optimisation of the addition of organic carbon showed that a minimum of 3% 2-propanol was necessary for a constant ratio of iodine to internal standard. The limit of quantification (LOQ), calculated as 30σ for the method, was 36 ng g(-1) in solid food samples. For method validation, seven standard reference materials (SRM) and 21 fortified food samples were used. The precision (%RSD) of the measurements was in the 2-7% range. Accuracies for the SRMs were 85-105%, while the fortified food samples showed 81-119% recoveries, including a number of samples fortified at 50% of the LOQ.

  6. Determination of total iodine in food samples using inductively coupled plasma-mass spectrometry.

    PubMed

    Benkhedda, Karima; Robichaud, André; Turcotte, Stéphane; Béraldin, Franca J; Cockell, Kevin A

    2009-01-01

    A method was developed and validated for the extraction and determination of total iodine (I) in food composite samples, representing different foods available on the Canadian market, by inductively coupled plasma-mass spectrometry (ICP-MS). Prior to analysis, samples were digested in a closed microwave system using a mixture of nitric acid and perchloric acid. The detection limit for iodine determination was 29 nglg and precisions of 10 and 1.3% were obtained for 10 replicate measurements of 100 and 1000 ng/g standards, respectively. The method was validated using Certified Reference Materials and spike recovery measurements in food samples and was applied for the determination of iodine in a variety of food composite samples from the Canadian Total Diet Study. The high sample throughput of ICP-MS makes the method suitable for analysis of large numbers of food samples with varying matrixes, such as for Total Diet Studies.

  7. Trace elemental composition of curry by inductively coupled plasma optical emission spectrometry (ICP-OES).

    PubMed

    Gonzálvez, A; Armenta, S; De La Guardia, M

    2008-01-01

    A methodology based on inductively coupled plasma optical emission spectrometry (ICP-OES) after microwave-assisted acid digestion was developed to determine the content of traces elements in curry samples from the Spanish market. The methodology was validated in terms of accuracy by the analysis of citrus and tomato leaf reference materials achieving comparable results with the certified values. The trace metal content of curry samples was compared with data available from previously published reports concerning Indian samples, especially in terms of heavy metal composition, in order to guarantee the quality of the commercially available spices in the European countries. Values found for the analysis of arsenic, lead and cadmium were significantly lower than the maximum limit allowed by European Union statutory limits for heavy metals and lower than those obtained for Indian curry leaves reported by Indian research teams by using neutron activation and γ-ray analysis.

  8. Pulsed radio-frequency discharge inductively coupled plasma mass spectrometry for oxide analysis

    NASA Astrophysics Data System (ADS)

    Li, Weifeng; Yin, Zhibin; Hang, Wei; Li, Bin; Huang, Benli

    2016-08-01

    A direct solid sampling technique has been developed based on a pulsed radio-frequency discharge (RFD) in mixture of N2 and Ar environment at atmospheric pressure. With an averaged input power of 65 W, a crater with the diameter of 80 μm and depth of 50 μm can be formed on sample surface after discharge for 1 min, suggesting the feasibility of the pulsed RFD for sampling nonconductive solids. Combined with inductively coupled plasma mass spectrometry (ICPMS), this technique allows to measure elemental composition of solids directly with relative standard deviation (RSD) of ~ 20%. Capability of quantitative analysis was demonstrated by the use of soil standards and artificial standards. Good calibration linearity and limits of detection (LODs) in range of 10- 8-10- 9 g/g were achieved for most elements.

  9. Induction thermal plasma synthesis of lithium oxide composite nanoparticles with a spinel structure

    NASA Astrophysics Data System (ADS)

    Sone, Hirotaka; Kageyama, Takuya; Tanaka, Manabu; Okamoto, Daisuke; Watanabe, Takayuki

    2016-07-01

    Li–Mn composite oxide nanoparticles are synthesized using an induction thermal plasma, and the formation mechanism is investigated on the basis of the homogenous nucleation rate and thermodynamic considerations. Under a high O2 partial pressure, MnO crystals nucleate and Li oxide condenses on MnO nuclei at a relatively high rate, forming LiMn2O4 in a single phase. On the other hand, under a low partial pressure of O2, LiMnO2 is obtained owing to the low condensation rate of Li oxide. This study presents the successful selective synthesis of LiMn2O4 nanoparticles by controlling the partial pressure of O2.

  10. Multi-elemental analysis of aqueous geological samples by inductively coupled plasma-optical emission spectrometry

    USGS Publications Warehouse

    Todorov, Todor I.; Wolf, Ruth E.; Adams, Monique

    2014-01-01

    Typically, 27 major, minor, and trace elements are determined in natural waters, acid mine drainage, extraction fluids, and leachates of geological and environmental samples by inductively coupled plasma-optical emission spectrometry (ICP-OES). At the discretion of the analyst, additional elements may be determined after suitable method modifications and performance data are established. Samples are preserved in 1–2 percent nitric acid (HNO3) at sample collection or as soon as possible after collection. The aqueous samples are aspirated into the ICP-OES discharge, where the elemental emission signals are measured simultaneously for 27 elements. Calibration is performed with a series of matrix-matched, multi-element solution standards.

  11. III-Nitride Dry Etching - Comparison of Inductively Coupled Plasma Chemistries

    SciTech Connect

    Abernathy, C.R.; Cho, H.; Donovan, S.M.; Hahn, Y-B.; Han, J.; Hays, D.C.; MacKenzie, J.D.; Pearton, S.J.; Shul, R.J.

    1998-11-10

    A systematic study of the etch characteristics of GaN, AlN and InN has been performed with boron halides- (BI{sub 3} and BBr{sub 3}) and interhalogen- (ICl and IBr) based Inductively Coupled Plasmas. Maximum etch selectivities of -100:1 were achieved for InN over both GaN and AlN in the BI{sub 3} mixtures due to the relatively high volatility of the InN etch products and the lower bond strength of InN. Maximum selectivies of- 14 for InN over GaN and >25 for InN over AlN were obtained with ICl and IBr chemistries. The etched surface morphologies of GaN in these four mixtures are similar or better than those of the control sample.

  12. Inductively coupled plasma etching of HgCdTe IRFPAs detectors at cryogenic temperature

    NASA Astrophysics Data System (ADS)

    Chen, Y. Y.; Ye, Z. H.; Sun, C. H.; Zhang, S.; Hu, X. N.; Ding, R. J.; He, L.

    2016-05-01

    To fabricate various advanced structures with HgCdTe material, the Inductively Coupled Plasma enhanced Reactive Ion Etching system is indispensable. However, due to low damage threshold and complicated behaviors of mercury in HgCdTe, the lattice damage and induced electrical conversion is very common. According to the diffusion model during etching period, the mercury interstitials, however, may not diffuse deep into the material at cryogenic temperature. In this report, ICP etching of HgCdTe at cryogenic temperature was implemented. The etching system with cryogenic assembly is provided by Oxford Instrument. The sample table was cooled down to 123K with liquid nitrogen. The mask of SiO2 with a contact layer of ZnS functioned well at this temperature. The selectivity and etching velocity maintained the same as reported in the etching of room temperature. Smooth and clean surfaces and profiles were achieved with an optimized recipe.

  13. Accurate determination of silver nanoparticles in animal tissues by inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Veverková, Lenka; Hradilová, Šárka; Milde, David; Panáček, Aleš; Skopalová, Jana; Kvítek, Libor; Petrželová, Kamila; Zbořil, Radek

    2014-12-01

    This study examined recoveries of silver determination in animal tissues after wet digestion by inductively coupled plasma mass spectrometry. The composition of the mineralization mixture for microwave assisted digestion was optimized and the best recoveries were obtained for mineralization with HNO3 and addition of HCl promptly after digestion. The optimization was performed on model samples of chicken meat spiked with silver nanoparticles and a solution of ionic silver. Basic calculations of theoretical distribution of Ag among various silver-containing species were implemented and the results showed that most of the silver is in the form of soluble complexes AgCl2- and AgCl32 - for the optimized composition of the mineralization mixture. Three animal tissue certified reference materials were then analyzed to verify the trueness and precision of the results.

  14. Automated standardization technique for an inductively-coupled plasma emission spectrometer

    USGS Publications Warehouse

    Garbarino, J.R.; Taylor, H.E.

    1982-01-01

    The manifold assembly subsystem described permits real-time computer-controlled standardization and quality control of a commercial inductively-coupled plasma atomic emission spectrometer. The manifold assembly consists of a branch-structured glass manifold, a series of microcomputer-controlled solenoid valves, and a reservoir for each standard. Automated standardization involves selective actuation of each solenoid valve that permits a specific mixed standard solution to be pumped to the nebulizer of the spectrometer. Quality control is based on the evaluation of results obtained for a mixed standard containing 17 analytes, that is measured periodically with unknown samples. An inaccurate standard evaluation triggers restandardization of the instrument according to a predetermined protocol. Interaction of the computer-controlled manifold assembly hardware with the spectrometer system is outlined. Evaluation of the automated standardization system with respect to reliability, simplicity, flexibility, and efficiency is compared to the manual procedure. ?? 1982.

  15. Separation of actinides using capillary extraction chromatography-inductively coupled plasma mass spectrometry

    SciTech Connect

    Peterson, Dominic S

    2008-01-01

    Trace levels of actinides have been separated on extraction chromatography columns. Detection of the actinides was achieved using an inductively coupled plasma mass spectrometer (ICP-MS), which was coupled with the extraction chromatography system. In this study we compare 30 cm long, 4.6 mm ID columns to capillary columns (750 {micro}m ID) with lengths from 30 cm up to 150 cm. The columns that were tested were packed with TRU resin. We were able to separate a mixture of five actinides ({sup 232}Th, {sup 238}U, {sup 237}Np, {sup 239}pU, {sup 241}Am). This work has application to rapid bioassay as well as for automated separations of actinide materials.

  16. [Study on the determination of 14 inorganic elements in coffee by inductively coupled plasma mass spectrometry].

    PubMed

    Nie, Xi-Du; Fu, Liang

    2013-07-01

    Samples of coffee were digested by microwave digestion, and inorganic elements amounts of Na, Mg, P, Ca, Cr, Mn, Fe, Co, Cu, Zn, As, Se, Mo and Pb in sample solutions were determined by inductively coupled plasma mass spectrometry (ICP-MS). HNO3 + H2O2 was used to achieve the complete decomposition of the organic matrix in a closed-vessel microwave oven. The working parameters of the instrument were optimized. The results showed that the relative standard deviation (RSD) was less than 3.84% for all the elements, and the recovery was found to be 92.00% -106.52% by adding standard recovery experiment. This method was simple, sensitive and precise and can perform simultaneous multi-elements determination of coffee, which could satisfy the sample examination request and provide scientific rationale for determining inorganic elements of coffee.

  17. Heavy metals in aromatic spices by inductively coupled plasma-mass spectrometry.

    PubMed

    Bua, Daniel Giuseppe; Annuario, Giovanni; Albergamo, Ambrogina; Cicero, Nicola; Dugo, Giacomo

    2016-09-01

    Objective of this study was to determine the content of Cd, Hg, As and Pb in common spices traded in the Italian market, using inductively coupled plasma-mass spectrometry (ICP-MS). The results were compared with the maximum limits established by the national Legislative Decree (LD) no. 107 implementing the Council Directive 88/388/EEC and by international organisations, such as Food and Agriculture Organization (FAO) and World Health Organization (WHO). Food safety for spices was assessed considering the tolerable weekly intake (TWI) and the provisional tolerable weekly intake (PTWI), respectively, for Cd and Hg and the 95% lower confidence limit of the benchmark dose of 1% extra risk (BMDL01) for As and Pb. Investigated elements in all samples were within the maximum limits as set by the national and international normative institutions. Nevertheless, the heavy metal content of some spices exceeded the PTWI, TWI and BMDL01, which needs attention when considering consumer's health.

  18. Inductively coupled plasma optical emission spectroscopy determination of trace element composition of argan oil.

    PubMed

    Gonzálvez, A; Ghanjaoui, M E; El Rhazi, M; de la Guardia, M

    2010-02-01

    A methodology based on inductively coupled plasma optical emission spectroscopy (ICP-OES) after microwave assisted acid digestion has been developed to determine the trace element content of Moroccan argan oil. Limit of detection values equal or lower than few mg/kg were obtained for all elements under study. To assure the accuracy of the whole procedure, recovery studies were carried out on argan oil samples spiked at different concentration levels from 10 to 200 µg/L. Quantitative average recovery values were obtained for all elements evaluated, demonstrating the suitability of this methodology for the determination of trace elements in argan oil samples. Aluminum, calcium, chromium, iron, potassium, lithium, magnesium, sodium, vanadium and zinc were quantitatively determined in Moroccan argan oils being found that their concentration is different of that found in other edible oils thus offering a way for authentication and for the evaluation of possible adulterations.

  19. Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

    SciTech Connect

    Kim, June Young; Kim, Young-Cheol; Kim, Yu-Sin; Chung, Chin-Wook

    2015-01-15

    The total energy lost per electron-ion pair lost ε{sub T} is investigated with the electron energy distribution function (EEDF). The EEDFs are measured at various argon powers in RF inductively coupled plasma, and the EEDFs show a depleted distribution (a discontinuity occurring at the minimum argon excitation threshold energy level) with the bulk temperature and the tail temperature. The total energy loss per electron-ion pair lost ε{sub T} is calculated from a power balance model with the Maxwellian EEDFs and the depleted EEDFs and then compared with the measured ε{sub T} from the floating probe. It is concluded that the small population of the depleted high energy electrons dramatically increases the collisional energy loss, and the calculated ε{sub T} from the depleted EEDFs has a value that is similar to the measured ε{sub T}.

  20. Analysis of cadmium and copper in cyanide plating solutions by the inductively coupled argon plasma spectrometer

    SciTech Connect

    Osbourn, G.R.

    1991-10-01

    The purpose of this work was to develop spectrometric methods for the analysis of copper and cadmium in cyanide plating solutions. If the methods were faster and/or more accurate than the classical volumetric methods being used, spectrometric methods could replace volumetric methods for routine production support. Spectrometric methods were developed on an inductively coupled argon plasma spectrometer. The spectrometric method developed for copper analysis proved as accurate as the classical chemical method, and faster, 20 minutes compared to two or three hours. Because of this significant savings, along with the reliability, the new method has replaced the classical method for routine production support. In contrast, the spectrometric method for cadmium proved to be slower, 30 minutes compared to 10 minutes, than the classical method. The spectrometric method is, however, accurate and reliable and will be retained as an alternate back-up method. 2 refs., 2 figs., 2 tabs.

  1. Determination of elemental content off rocks by laser ablation inductively coupled plasma mass spectrometry

    USGS Publications Warehouse

    Lichte, F.E.

    1995-01-01

    A new method of analysis for rocks and soils is presented using laser ablation inductively coupled plasma mass spectrometry. It is based on a lithium borate fusion and the free-running mode of a Nd/YAG laser. An Ar/N2 sample gas improves sensitivity 7 ?? for most elements. Sixty-three elements are characterized for the fusion, and 49 elements can be quantified. Internal standards and isotopic spikes ensure accurate results. Limits of detection are 0.01 ??g/g for many trace elements. Accuracy approaches 5% for all elements. A new quality assurance procedure is presented that uses fundamental parameters to test relative response factors for the calibration.

  2. [A genetic algorithm approach to qualitative analysis in inductively coupled plasma-atomic emission spectroscopy].

    PubMed

    Peng, Bin; Liu, Ke-ling; Li, Zhi-min; Wang, Yue-song; Huang, Tu-jiang

    2002-06-01

    Genetic algorithm (GA) is used in automatic qualitative analysis by a sequential inductively coupled plasma spectrometer (ICP-AES) and a computer program is developed in this paper. No any standard samples are needed, and spectroscopic interferences can be eliminated. All elements and their concentration ranges of an unknown sample can be reported. The replication rate Pr, crossover rate Pc, and mutation rate of the genetic algorithm were adjusted to be 0.6, 0.4 and 0 respectively. The analytical results of GA are in good agreement with the reference values. It indicates that, combined with the intensity information, the GA can be applied to spectroscopic qualitative analysis and expected to become an effective method in qualitative analysis in ICP-AES after further work. PMID:12938334

  3. Automation of preparation of nonmetallic samples for analysis by atomic absorption and inductively coupled plasma spectrometry

    NASA Technical Reports Server (NTRS)

    Wittmann, A.; Willay, G.

    1986-01-01

    For a rapid preparation of solutions intended for analysis by inductively coupled plasma emission spectrometry or atomic absorption spectrometry, an automatic device called Plasmasol was developed. This apparatus used the property of nonwettability of glassy C to fuse the sample in an appropriate flux. The sample-flux mixture is placed in a composite crucible, then heated at high temperature, swirled until full dissolution is achieved, and then poured into a water-filled beaker. After acid addition, dissolution of the melt, and filling to the mark, the solution is ready for analysis. The analytical results obtained, either for oxide samples or for prereduced iron ores show that the solutions prepared with this device are undistinguished from those obtained by manual dissolutions done by acid digestion or by high temperature fusion. Preparation reproducibility and analytical tests illustrate the performance of Plasmasol.

  4. Measurement of lanthanum and technetium in uranium fuels by inductively coupled plasma atomic emission spectroscopy.

    SciTech Connect

    Carney, K.; Crane, P.; Cummings, D.; Krsul, J.; McKnight, R.

    1999-06-10

    An important parameter in characterizing an irradiated nuclear fuel is determining the amount of uranium fissioned. By determining the amount of uranium fissioned in the fuel a burnup performance parameter can be calculated, and the amount of fission products left in the fuel can be predicted. The quantity of uranium fissioned can be calculated from the amount of lanthanum and technetium present in the fuel. Lanthanum and technetium were measured in irradiated fuel samples using an Inductively Coupled Plasma Atomic Emission Spectroscopy (ICP-AES) instrument and separation equipment located in a shielded glove-box. A discussion of the method, interferences, detection limits, quality control and a comparison to other work will be presented.

  5. Plasma shape control by pulsed solenoid on laser ion source

    DOE PAGESBeta

    Sekine, M.; Ikeda, S.; Romanelli, M.; Kumaki, M.; Fuwa, Y.; Kanesue, T.; Hayashizaki, N.; Lambiase, R.; Okamura, M.

    2015-05-28

    A Laser ion source (LIS) provides high current heavy ion beams with a very simple mechanical structure. Plasma is produced by a pulsed laser ablation of a solid state target and ions are extracted by an electric field. It was difficult to manipulate the beam parameters of a LIS, since the plasma condition could only be adjusted by the laser irradiation condition. To enhance flexibility of LIS operation, we employed a pulsed solenoid in the plasma drift section and investigated the effect of the solenoid field on singly charged iron beams. The experimentally obtained current profile was satisfactorily controlled bymore » the pulsed magnetic field. Thus, this approach may also be useful to reduce beam emittance of a LIS.« less

  6. Plasma shape control by pulsed solenoid on laser ion source

    SciTech Connect

    Sekine, M.; Ikeda, S.; Romanelli, M.; Kumaki, M.; Fuwa, Y.; Kanesue, T.; Hayashizaki, N.; Lambiase, R.; Okamura, M.

    2015-05-28

    A Laser ion source (LIS) provides high current heavy ion beams with a very simple mechanical structure. Plasma is produced by a pulsed laser ablation of a solid state target and ions are extracted by an electric field. It was difficult to manipulate the beam parameters of a LIS, since the plasma condition could only be adjusted by the laser irradiation condition. To enhance flexibility of LIS operation, we employed a pulsed solenoid in the plasma drift section and investigated the effect of the solenoid field on singly charged iron beams. The experimentally obtained current profile was satisfactorily controlled by the pulsed magnetic field. Thus, this approach may also be useful to reduce beam emittance of a LIS.

  7. Enhanced magnetic ionization in hydrogen reflex discharge plasma source

    SciTech Connect

    Toader, E.I.; Covlea, V.N.

    2005-03-01

    The effect of enhanced magnetic ionization on the external and internal parameters of a high-density, low pressure reflex plasma source operating in hydrogen is studied. The Langmuir probe method and Druyvesteyn procedure coupled with suitable software are used to measure the internal parameters. The bulk plasma region is free of an electric field and presents a high degree of uniformity. The electron energy distribution function is bi-Maxwellian with a dip/shoulder structure around 5.5 eV, independent of external parameters and radial position. Due to the enhanced hollow cathode effect by the magnetic trapping of electrons, the electron density n{sub e} is as high as 10{sup 18} m{sup -3}, and the electron temperature T{sub e} is as low as a few tens of an electron volt, for dissipated energy of tens of Watts. The bulk plasma density scales with the dissipated power.

  8. Physics data base for the Beam Plasma Neutron Source (BPNS)

    NASA Astrophysics Data System (ADS)

    Coensgen, F. H.; Casper, T. A.; Correll, D. L.; Damm, C. C.; Futch, A. H.; Molvik, A. W.

    1990-10-01

    A 14-MeV deuterium-tritium (D-T) neutron source for accelerated end-of-life testing of fusion reactor materials has been designed on the basis of a linear two-component collisional plasma system. An intense flux (up to 5 x 10(exp 18)/sq m sec) of 14 MeV neutrons is produced in a fully ionized high-density (n sub e approx. = 3 x 10(exp 21) per cu m) tritium target by transverse injection of 60 MW of neutral beam power. Power deposited in the target is removed by thermal electron conduction to large end chambers, where it is deposited in gaseous plasma collectors. We show in this paper that the major physics issues have now been experimentally demonstrated. These include magnetohydrodynamic (MHD) equilibrium and stability, microstability, startup, fueling, Spitzer electron thermal conductivity, and power deposition in a gaseous plasma collector. However, an integrated system was not demonstrated.

  9. Analysis of non-equilibrium phenomena in inductively coupled plasma generators

    NASA Astrophysics Data System (ADS)

    Zhang, W.; Lani, A.; Panesi, M.

    2016-07-01

    This work addresses the modeling of non-equilibrium phenomena in inductively coupled plasma discharges. In the proposed computational model, the electromagnetic induction equation is solved together with the set of Navier-Stokes equations in order to compute the electromagnetic and flow fields, accounting for their mutual interaction. Semi-classical statistical thermodynamics is used to determine the plasma thermodynamic properties, while transport properties are obtained from kinetic principles, with the method of Chapman and Enskog. Particle ambipolar diffusive fluxes are found by solving the Stefan-Maxwell equations with a simple iterative method. Two physico-mathematical formulations are used to model the chemical reaction processes: (1) A Local Thermodynamics Equilibrium (LTE) formulation and (2) a thermo-chemical non-equilibrium (TCNEQ) formulation. In the TCNEQ model, thermal non-equilibrium between the translational energy mode of the gas and the vibrational energy mode of individual molecules is accounted for. The electronic states of the chemical species are assumed in equilibrium with the vibrational temperature, whereas the rotational energy mode is assumed to be equilibrated with translation. Three different physical models are used to account for the coupling of chemistry and energy transfer processes. Numerical simulations obtained with the LTE and TCNEQ formulations are used to characterize the extent of non-equilibrium of the flow inside the Plasmatron facility at the von Karman Institute. Each model was tested using different kinetic mechanisms to assess the sensitivity of the results to variations in the reaction parameters. A comparison of temperatures and composition profiles at the outlet of the torch demonstrates that the flow is in non-equilibrium for operating conditions characterized by pressures below 30 000 Pa, frequency 0.37 MHz, input power 80 kW, and mass flow 8 g/s.

  10. Calculation of the Non-Inductive Current Profile in High-Performance NSTX Plasmas

    SciTech Connect

    Gerhardt, S P; Gates, D; Kaye, S; Menard, J; Bell, M G; Bell, R E; Le Blanc, B P; Kugel, H; Sabbagh, S A

    2011-02-09

    The constituents of the current profile have been computed for a wide range of high-performance plasmas in NSTX [M. Ono, et al., Nuclear Fusion 40, 557 (2000)]; these include cases designed to maximize the non-inductive fraction, pulse length, toroidal-β, or stored energy. In the absence of low-frequency MHD activity, good agreement is found between the reconstructed current profile and that predicted by summing the independently calculated inductive, pressure-driven, and neutral beam currents, without the need to invoke any anomalous beam ion diffusion. Exceptions occur, for instance, when there are toroidal Alfven eigenmode avalanches or coupled m/n=1/1+2/1 kink-tearing modes. In these cases, the addition of a spatially and temporally dependent fast ion diffusivity can reduce the core beam current drive, restoring agreement between the reconstructed profile and the summed constituents, as well as bringing better agreement between the simulated and measured neutron emission rate. An upper bound on the fast ion diffusivity of ~0.5-1 m2/sec is found in “MHD-free” discharges, based on the neutron emission, time rate of change of the neutron signal when a neutral beam is stepped, and reconstructed on-axis current density.

  11. Calculation of the non-inductive current profile in high-performance NSTX plasmas

    NASA Astrophysics Data System (ADS)

    Gerhardt, S. P.; Fredrickson, E.; Gates, D.; Kaye, S.; Menard, J.; Bell, M. G.; Bell, R. E.; Le Blanc, B. P.; Kugel, H.; Sabbagh, S. A.; Yuh, H.

    2011-03-01

    The constituents of the current profile have been computed for a wide range of high-performance plasmas in NSTX (Ono et al 2000 Nucl. Fusion 40 557); these include cases designed to maximize the non-inductive fraction, pulse length, toroidal-β or stored energy. In the absence of low-frequency MHD activity, good agreement is found between the reconstructed current profile and that predicted by summing the independently calculated inductive, pressure-driven and neutral beam currents, without the need to invoke any anomalous beam ion diffusion. Exceptions occur, for instance, when there are toroidal Alfvén eigenmode avalanches or coupled m/n = 1/1 + 2/1 kink-tearing modes. In these cases, the addition of a spatially and temporally dependent fast-ion diffusivity can reduce the core beam current drive, restoring agreement between the reconstructed profile and the summed constituents, as well as bringing better agreement between the simulated and measured neutron emission rate. An upper bound on the fast-ion diffusivity of ~0.5-1 m2 s-1 is found in 'MHD-free' discharges, based on the neutron emission, the time rate of change in the neutron signal when a neutral beam is stepped and reconstructed on-axis current density.

  12. Simulation and experimental studies on plasma temperature, flow velocity, and injector diameter effects for an inductively coupled plasma.

    PubMed

    Lindner, Helmut; Murtazin, Ayrat; Groh, Sebastian; Niemax, Kay; Bogaerts, Annemie

    2011-12-15

    An inductively coupled plasma (ICP) is analyzed by means of experiments and numerical simulation. Important plasma properties are analyzed, namely, the effective temperature inside the central channel and the mean flow velocity inside the plasma. Furthermore, the effect of torches with different injector diameters is studied by the model. The temperature inside the central channel is determined from the end-on collected line-to-background ratio in dependence of the injector gas flow rates. Within the limits of 3% deviation, the results of the simulation and the experiments are in good agreement in the range of flow rates relevant for the analysis of relatively large droplets, i.e., ∼50 μm. The deviation increases for higher gas flow rates but stays below 6% for all flow rates studied. The velocity of the gas inside the coil region was determined by side-on analyte emission measurements with single monodisperse droplet introduction and by the analysis of the injector gas path lines in the simulation. In the downstream region significantly higher velocities were found than in the upstream region in both the simulation and the experiment. The quantitative values show good agreement in the downstream region. In the upstream region, deviations were found in the absolute values which can be attributed to the flow conditions in that region and because the methods used for velocity determination are not fully consistent. Eddy structures are found in the simulated flow lines. These affect strongly the way taken by the path lines of the injector gas and they can explain the very long analytical signals found in the experiments at low flow rates. Simulations were performed for different injector diameters in order to find conditions where good analyte transport and optimum signals can be expected. The results clearly show the existence of a transition flow rate which marks the lower limit for effective analyte transport conditions through the plasma. A rule

  13. Photoluminescence Observation of GaN Thin Films Treated by Inductively-Coupled Plasmas

    NASA Astrophysics Data System (ADS)

    Nakamura, Keiji; Itoh, Noriyoshi; Nakano, Yoshitaka; Sugai, Hideo

    2011-10-01

    This paper reports observations of photoluminescence from plasma-treated GaN thin films. A 10 mTorr Ar ICP was used, and irradiation of 313 nm ultraviolet (UV) light from Hg-Xe light source induced the photoluminescence of the GaN film. In both in-situ and ex-situ observations, significant yellow luminescence was observed visually, and the ex-situ observed luminescence ranges in a wavelength of 500-800 nm corresponding to defect-states-related transition. The measurements also revealed that the luminescence also contains UV emission at a wavelength of ~365 nm attributed to transition related to near band edges. In order to examine effects of the plasma on the luminescence, the ex-situ observation was made as a function of the plasma treatment time. As the treatment time increased, both the UV and the luminescence intensity decreased, and the decrease in the emission became significant when the 313 nm UV light was irradiated onto the plasma-exposed GaN surface. These results suggested that plasma-induced defect formation leads to the luminescence degradation, and that the photoluminescence observation will be useful for damage monitoring of the GaN surface. This work is partly supported by the 2nd stage Knowledge Cluster Initiative and Grant-in-Aid for Scientific Research (C) from the Ministry of Education, Culture, Sports, Science and Technology of Japan.

  14. Investigation of a measure of robustness in inductively coupled plasma mass spectrometry

    NASA Astrophysics Data System (ADS)

    Makonnen, Yoseif; Beauchemin, Diane

    2015-01-01

    In industrial/commercial settings where operators often have minimal expertise in inductively coupled plasma (ICP) mass spectrometry (MS), there is a prevalent need for a response factor indicating robust plasma conditions, which is analogous to the Mg II/Mg I ratio in ICP optical emission spectrometry (OES), whereby a Mg II/Mg I ratio of 10 constitutes robust conditions. While minimizing the oxide ratio usually corresponds to robust conditions, there is no specific target value that is widely accepted as indicating robust conditions. Furthermore, tuning for low oxide ratios does not necessarily guarantee minimal matrix effects, as they really address polyatomic interferences. From experiments, conducted in parallel for both MS and OES, there were some element pairs of similar mass and very different ionization potential that were exploited for such a purpose, the rationale being that, if these elements were ionized to the same extent, then that could be indicative of a robust plasma. The Be II/Li I intensity ratio was directly related to the Mg II/Mg I ratio in OES. Moreover, the 9Be+/7Li+ ratio was inversely related to the CeO+/Ce+ and LaO+/La+ oxide ratios in MS. The effects of different matrices (i.e. 0.01-0.1 M Na) were also investigated and compared to a conventional argon plasma optimized for maximum sensitivity. The suppression effect of these matrices was significantly reduced, if not eliminated in the case of 0.01 M Na, when the 9Be+/7Li+ ratio was around 0.30 on the Varian 820 MS instrument. Moreover, a very similar ratio (0.28) increased robustness to the same extent on a completely different ICP-MS instrument (PerkinElmer NEXION). Much greater robustness was achieved using a mixed-gas plasma with nitrogen in the outer gas and either nitrogen or hydrogen as a sheathing gas, as the 9Be+/7Li+ ratio was then around 1.70. To the best of our knowledge, this is the first report on using a simple analyte intensity ratio, 9Be+/7Li+, to gauge plasma robustness.

  15. Controlling the relative rates of adlayer formation and removal during etching in inductively coupled plasmas

    NASA Astrophysics Data System (ADS)

    Fuller, Nicholas Colvin Masi

    Laser desorption (LD) of the adlayer coupled with laser induced fluorescence (LIF) and plasma induced emission (PIE) of desorbed adsorbates is used to investigate the relative rates of chlorination and sputtering during the etching of Si in inductively coupled Cl2-Ar plasmas. Such an analysis is a two-fold process: surface analysis and plasma characterization. Surface analysis of Si etching using LD-LIF and LD-PIE techniques combined with etch rate measurements have revealed that the coverage of SiCl2 and etch rate increases and coverage of Si decreases abruptly for a chlorine fraction of 75% and ion energy of 80 eV. The precise Cl2 fraction for which these abrupt changes occur increases with an increase in ion energy. These changes may be caused by local chemisorption-induced reconstruction of Si <100>. Furthermore, the chlorination and sputtering rates are increased by ˜ an order of magnitude as the plasma is changed from Ar-dominant to Cl-dominant. Characterization of the plasma included determination of the dominant ion in Cl2 plasmas using LIF and a Langmuir probe and measurement of the absolute densities of Cl2, Cl, Cl+, and At + in Cl2-Ar discharges using optical emission actinometry. These studies reveal that Cl+ is the dominant positive ion in the H-mode and the dissociation of Cl2 to Cl increases with an increase in Ar fraction due to an increase in electron temperature. Furthermore, for powers exceeding 600 W, the neutral to ion flux ratio is strongly dependent on Cl2 fraction and is attributed mostly to the decrease in Cl density. Such dependence of the flux ratio on Cl2 fraction is significant in controlling chlorination and sputtering rates not only for Si etching, but for etching other key technological materials. ICP O2 discharges were also studied for low-kappa polymeric etch applications. These studies reveal that the electron temperature is weakly dependent on rf power and O2 dissociation is low (˜2%) at the maximum rf power density of 5.7 Wcm

  16. Radiation sources based on laser-plasma interactions.

    PubMed

    Jaroszynski, D A; Bingham, R; Brunetti, E; Ersfeld, B; Gallacher, J; van der Geer, B; Issac, R; Jamison, S P; Jones, D; de Loos, M; Lyachev, A; Pavlov, V; Reitsma, A; Saveliev, Y; Vieux, G; Wiggins, S M

    2006-03-15

    Plasma waves excited by intense laser beams can be harnessed to produce femtosecond duration bunches of electrons with relativistic energies. The very large electrostatic forces of plasma density wakes trailing behind an intense laser pulse provide field potentials capable of accelerating charged particles to high energies over very short distances, as high as 1GeV in a few millimetres. The short length scale of plasma waves provides a means of developing very compact high-energy accelerators, which could form the basis of compact next-generation light sources with unique properties. Tuneable X-ray radiation and particle pulses with durations of the order of or less than 5fs should be possible and would be useful for probing matter on unprecedented time and spatial scales. If developed to fruition this revolutionary technology could reduce the size and cost of light sources by three orders of magnitude and, therefore, provide powerful new tools to a large scientific community. We will discuss how a laser-driven plasma wakefield accelerator can be used to produce radiation with unique characteristics over a very large spectral range.

  17. Preliminary Study of a Hybrid Helicon-ECR Plasma Source

    NASA Astrophysics Data System (ADS)

    M. Hala, A.; Oksuz, L.; Ximing, Zhu

    2016-08-01

    A new type of hybrid discharge is experimentally investigated in this work. A helicon source and an electron cyclotron resonance (ECR) source were combined to produce plasma. As a preliminary study of this type of plasma, the optical emission spectroscopy (OES) method was used to obtain values of electron temperature and density under a series of typical conditions. Generally, it was observed that the electron temperature decreases and the electron density increases as the pressure increased. When increasing the applied power at a certain pressure, the average electron density at certain positions in the discharge does not increase significantly possibly due to the high degree of neutral depletion. Electron temperature increased with power in the hybrid mode. Possible mechanisms of these preliminary observations are discussed.

  18. On the density limit in the helicon plasma sources

    SciTech Connect

    Kotelnikov, Igor A.

    2014-12-15

    Existence of the density limit in the helicon plasma sources is revisited. The low- and high-frequency regimes of a helicon plasma source operation are distinguished. In the low-frequency regime with ω<√(ω{sub ci}ω{sub ce}), the density limit is deduced from the Golant-Stix criterion of the accessibility of the lower hybrid resonance. In the high-frequency case, ω>√(ω{sub ci}ω{sub ce}), an appropriate limit is given by the Shamrai-Taranov criterion. Both these criteria are closely related to the phenomenon of the coalescence of the helicon wave with the Trivelpiece-Gould mode. We draw a conclusion that the derived density limits are not currently achieved in existing devices, perhaps, because of high energy cost of gas ionization.

  19. Laboratory Plasma Source as an MHD Model for Astrophysical Jets

    NASA Technical Reports Server (NTRS)

    Mayo, Robert M.

    1997-01-01

    The significance of the work described herein lies in the demonstration of Magnetized Coaxial Plasma Gun (MCG) devices like CPS-1 to produce energetic laboratory magneto-flows with embedded magnetic fields that can be used as a simulation tool to study flow interaction dynamic of jet flows, to demonstrate the magnetic acceleration and collimation of flows with primarily toroidal fields, and study cross field transport in turbulent accreting flows. Since plasma produced in MCG devices have magnetic topology and MHD flow regime similarity to stellar and extragalactic jets, we expect that careful investigation of these flows in the laboratory will reveal fundamental physical mechanisms influencing astrophysical flows. Discussion in the next section (sec.2) focuses on recent results describing collimation, leading flow surface interaction layers, and turbulent accretion. The primary objectives for a new three year effort would involve the development and deployment of novel electrostatic, magnetic, and visible plasma diagnostic techniques to measure plasma and flow parameters of the CPS-1 device in the flow chamber downstream of the plasma source to study, (1) mass ejection, morphology, and collimation and stability of energetic outflows, (2) the effects of external magnetization on collimation and stability, (3) the interaction of such flows with background neutral gas, the generation of visible emission in such interaction, and effect of neutral clouds on jet flow dynamics, and (4) the cross magnetic field transport of turbulent accreting flows. The applicability of existing laboratory plasma facilities to the study of stellar and extragalactic plasma should be exploited to elucidate underlying physical mechanisms that cannot be ascertained though astrophysical observation, and provide baseline to a wide variety of proposed models, MHD and otherwise. The work proposed herin represents a continued effort on a novel approach in relating laboratory experiments to

  20. Dynamics of ion beam charge neutralization by ferroelectric plasma sources

    NASA Astrophysics Data System (ADS)

    Stepanov, Anton D.; Gilson, Erik P.; Grisham, Larry R.; Kaganovich, Igor D.; Davidson, Ronald C.

    2016-04-01

    Ferroelectric Plasma Sources (FEPSs) can generate plasma that provides effective space-charge neutralization of intense high-perveance ion beams, as has been demonstrated on the Neutralized Drift Compression Experiment NDCX-I and NDCX-II. This article presents experimental results on charge neutralization of a high-perveance 38 keV Ar+ beam by a plasma produced in a FEPS discharge. By comparing the measured beam radius with the envelope model for space-charge expansion, it is shown that a charge neutralization fraction of 98% is attainable with sufficiently dense FEPS plasma. The transverse electrostatic potential of the ion beam is reduced from 15 V before neutralization to 0.3 V, implying that the energy of the neutralizing electrons is below 0.3 eV. Measurements of the time-evolution of beam radius show that near-complete charge neutralization is established ˜5 μs after the driving pulse is applied to the FEPS and can last for 35 μs. It is argued that the duration of neutralization is much longer than a reasonable lifetime of the plasma produced in the sub-μs surface discharge. Measurements of current flow in the driving circuit of the FEPS show the existence of electron emission into vacuum, which lasts for tens of μs after the high voltage pulse is applied. It is argued that the beam is neutralized by the plasma produced by this process and not by a surface discharge plasma that is produced at the instant the high-voltage pulse is applied.