Reference Materials for Food and Nutrition Metrology: Past, Present and Future

USDA-ARS?s Scientific Manuscript database

Establishment of a metrology-based measurement system requires the solid foundation of traceability of measurements to available, appropriate certified reference materials (CRM). In the early 1970’s the first “biological” RM of Bowens Kale, as well as Orchard Leaves and Bovine Liver SRMs, from the ...

Comparison of the performance of the next generation of optical interferometers

NASA Astrophysics Data System (ADS)

Pisani, Marco; Yacoot, Andrew; Balling, Petr; Bancone, Nicola; Birlikseven, Cengiz; Çelik, Mehmet; Flügge, Jens; Hamid, Ramiz; Köchert, Paul; Kren, Petr; Kuetgens, Ulrich; Lassila, Antti; Bartolo Picotto, Gian; Şahin, Ersoy; Seppä, Jeremias; Tedaldi, Matthew; Weichert, Christoph

2012-08-01

Six European National Measurement Institutes (NMIs) have joined forces within the European Metrology Research Programme funded project NANOTRACE to develop the next generation of optical interferometers having a target uncertainty of 10 pm. These are needed for NMIs to provide improved traceable dimensional metrology that can be disseminated to the wider nanotechnology community, thereby supporting the growth in nanotechnology. Several approaches were followed in order to develop the interferometers. This paper briefly describes the different interferometers developed by the various partners and presents the results of a comparison of performance of the optical interferometers using an x-ray interferometer to generate traceable reference displacements.

Theory-based metrological traceability in education: A reading measurement network.

PubMed

Fisher, William P; Stenner, A Jackson

2016-10-01

Huge resources are invested in metrology and standards in the natural sciences, engineering, and across a wide range of commercial technologies. Significant positive returns of human, social, environmental, and economic value on these investments have been sustained for decades. Proven methods for calibrating test and survey instruments in linear units are readily available, as are data- and theory-based methods for equating those instruments to a shared unit. Using these methods, metrological traceability is obtained in a variety of commercially available elementary and secondary English and Spanish language reading education programs in the U.S., Canada, Mexico, and Australia. Given established historical patterns, widespread routine reproduction of predicted text-based and instructional effects expressed in a common language and shared frame of reference may lead to significant developments in theory and practice. Opportunities for systematic implementations of teacher-driven lean thinking and continuous quality improvement methods may be of particular interest and value.

Radioactive waste management: review on clearance levels and acceptance criteria legislation, requirements and standards.

PubMed

Maringer, F J; Suráň, J; Kovář, P; Chauvenet, B; Peyres, V; García-Toraño, E; Cozzella, M L; De Felice, P; Vodenik, B; Hult, M; Rosengård, U; Merimaa, M; Szücs, L; Jeffery, C; Dean, J C J; Tymiński, Z; Arnold, D; Hinca, R; Mirescu, G

2013-11-01

In 2011 the joint research project Metrology for Radioactive Waste Management (MetroRWM)(1) of the European Metrology Research Programme (EMRP) started with a total duration of three years. Within this project, new metrological resources for the assessment of radioactive waste, including their calibration with new reference materials traceable to national standards will be developed. This paper gives a review on national, European and international strategies as basis for science-based metrological requirements in clearance and acceptance of radioactive waste. © 2013 Elsevier Ltd. All rights reserved.

Evaluating droplet digital PCR for the quantification of human genomic DNA: converting copies per nanoliter to nanograms nuclear DNA per microliter.

PubMed

Duewer, David L; Kline, Margaret C; Romsos, Erica L; Toman, Blaza

2018-05-01

The highly multiplexed polymerase chain reaction (PCR) assays used for forensic human identification perform best when used with an accurately determined quantity of input DNA. To help ensure the reliable performance of these assays, we are developing a certified reference material (CRM) for calibrating human genomic DNA working standards. To enable sharing information over time and place, CRMs must provide accurate and stable values that are metrologically traceable to a common reference. We have shown that droplet digital PCR (ddPCR) limiting dilution end-point measurements of the concentration of DNA copies per volume of sample can be traceably linked to the International System of Units (SI). Unlike values assigned using conventional relationships between ultraviolet absorbance and DNA mass concentration, entity-based ddPCR measurements are expected to be stable over time. However, the forensic community expects DNA quantity to be stated in terms of mass concentration rather than entity concentration. The transformation can be accomplished given SI-traceable values and uncertainties for the number of nucleotide bases per human haploid genome equivalent (HHGE) and the average molar mass of a nucleotide monomer in the DNA polymer. This report presents the considerations required to establish the metrological traceability of ddPCR-based mass concentration estimates of human nuclear DNA. Graphical abstract The roots of metrological traceability for human nuclear DNA mass concentration results. Values for the factors in blue must be established experimentally. Values for the factors in red have been established from authoritative source materials. HHGE stands for "haploid human genome equivalent"; there are two HHGE per diploid human genome.

[Report of the NEDO project "Research and development to promote the creation and utilization of an intellectual infrastructure: development of reference materials for laboratory medicine" "Development of pure substance-type certified reference materials"].

PubMed

Takatsu, Akiko

2009-06-01

There is an increasing demand to establish a metrological traceability system for in vitro diagnostics and medical devices. Pure substance-type reference materials are playing key roles in metrological traceability, because they form the basis for many traceability chains in chemistry. The National Metrology Institute of Japan (NMIJ), in the National Institute of Advanced Industrial Science and Technology (AIST), has been developing purity-certified reference materials (CRMs) in this field, such as cholesterol, creatinine, and urea. In the New Energy and Industrial Technology Development Organization (NEDO) project, entitled: "Research and Development to Promote the Creation and Utilization of an Intellectual Infrastructure: Development of Reference Materials for Laboratory Medicine", several pure substance-type CRMs were developed. For a pure protein solution CRM, amino acid analysis and nitrogen determination were chosen as the certification methods. The development and certification processes for the C-reactive protein (CRP) solution CRM were completed, with the recombinant human CRP solution as a candidate material. This CRP solution CRM is now available as NMIJ CRM. For cortisol CRM, a purified candidate material and highly pure primary reference material were prepared. Each impure compound in the materials was identified and quantified. The pure cortisol CRM will be available in 2009. These two CRMs provide a traceability link between routine clinical methods and the SI unit.

History of reference materials for food and nutrition metrology: As represented in the series of BERM Symposia

USDA-ARS?s Scientific Manuscript database

Establishment of a metrology-based measurement system requires the solid foundation of traceability of measurements to available, appropriate certified reference materials (CRM). In the early 1970s the first “biological” Reference Material (RM) of Bowens Kale, Orchard Leaves, and Bovine Liver from ...

Photomask applications of traceable atomic force microscope dimensional metrology at NIST

NASA Astrophysics Data System (ADS)

Dixson, Ronald; Orji, Ndubuisi G.; Potzick, James; Fu, Joseph; Allen, Richard A.; Cresswell, Michael; Smith, Stewart; Walton, Anthony J.; Tsiamis, Andreas

2007-10-01

The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. Three major instruments are being used for traceable measurements. The first is a custom in-house metrology AFM, called the calibrated AFM (C-AFM), the second is the first generation of commercially available critical dimension AFM (CD-AFM), and the third is a current generation CD-AFM at SEMATECH - for which NIST has established the calibration and uncertainties. All of these instruments have useful applications in photomask metrology. Linewidth reference metrology is an important application of CD-AFM. We have performed a preliminary comparison of linewidths measured by CD-AFM and by electrical resistance metrology on a binary mask. For the ten selected test structures with on-mask linewidths between 350 nm and 600 nm, most of the observed differences were less than 5 nm, and all of them were less than 10 nm. The offsets were often within the estimated uncertainties of the AFM measurements, without accounting for the effect of linewidth roughness or the uncertainties of electrical measurements. The most recent release of the NIST photomask standard - which is Standard Reference Material (SRM) 2059 - was also supported by CD-AFM reference measurements. We review the recent advances in AFM linewidth metrology that will reduce the uncertainty of AFM measurements on this and future generations of the NIST photomask standard. The NIST C-AFM has displacement metrology for all three axes traceable to the 633 nm wavelength of the iodine-stabilized He-Ne laser. One of the important applications of the C-AFM is step height metrology, which has some relevance to phase shift calibration. In the current generation of the system, the approximate level of relative standard uncertainty for step height measurements at the 100 nm scale is 0.1 %. We discuss the monitor history of a 290 nm step height, originally measured on the C-AFM with a 1.9 nm (k = 2) expanded uncertainty, and describe advances that bring the step height uncertainty of recent measurements to an estimated 0.6 nm (k = 2). Based on this work, we expect to be able to reduce the topographic component of phase uncertainty in alternating aperture phase shift masks (AAPSM) by a factor of three compared to current calibrations based on earlier generation step height references.

Injection and injection-compression moulding replication capability for the production of polymer lab-on-a-chip with nano structures

NASA Astrophysics Data System (ADS)

Calaon, M.; Tosello, G.; Garnaes, J.; Hansen, H. N.

2017-10-01

The manufacturing precision and accuracy in the production of polymer lab-on-a-chip components with 100-130 nm deep nanochannels are evaluated using a metrological approach. Replication fidelity on corresponding process fingerprint test nanostructures over different substrates (nickel tool and polymer part) is quantified through traceable atomic force microscope measurements. Dimensions of injection moulded (IM) and injection-compression moulded (ICM) thermoplastic cyclic olefin copolymer nanofeatures are characterized depending on process parameters and four different features positions on a 30  ×  80 mm2 area. Replication capability of IM and ICM technologies are quantified and the products tolerance at the nanometre dimensional scale verified.

Towards absolute quantification of allergenic proteins in food--lysozyme in wine as a model system for metrologically traceable mass spectrometric methods and certified reference materials.

PubMed

Cryar, Adam; Pritchard, Caroline; Burkitt, William; Walker, Michael; O'Connor, Gavin; Burns, Duncan Thorburn; Quaglia, Milena

2013-01-01

Current routine food allergen quantification methods, which are based on immunochemistry, offer high sensitivity but can suffer from issues of specificity and significant variability of results. MS approaches have been developed, but currently lack metrological traceability. A feasibility study on the application of metrologically traceable MS-based reference procedures was undertaken. A proof of concept involving proteolytic digestion and isotope dilution MS for quantification of protein allergens in a food matrix was undertaken using lysozyme in wine as a model system. A concentration of lysozyme in wine of 0.95 +/- 0.03 microg/g was calculated based on the concentrations of two peptides, confirming that this type of analysis is viable at allergenically meaningful concentrations. The challenges associated with this promising method were explored; these included peptide stability, chemical modification, enzymatic digestion, and sample cleanup. The method is suitable for the production of allergen in food certified reference materials, which together with the achieved understanding of the effects of sample preparation and of the matrix on the final results, will assist in addressing the bias of the techniques routinely used and improve measurement confidence. Confirmation of the feasibility of MS methods for absolute quantification of an allergenic protein in a food matrix with results traceable to the International System of Units is a step towards meaningful comparison of results for allergen proteins among laboratories. This approach will also underpin risk assessment and risk management of allergens in the food industry, and regulatory compliance of the use of thresholds or action levels when adopted.

Measurement uncertainty: Friend or foe?

PubMed

Infusino, Ilenia; Panteghini, Mauro

2018-02-02

The definition and enforcement of a reference measurement system, based on the implementation of metrological traceability of patients' results to higher order reference methods and materials, together with a clinically acceptable level of measurement uncertainty, are fundamental requirements to produce accurate and equivalent laboratory results. The uncertainty associated with each step of the traceability chain should be governed to obtain a final combined uncertainty on clinical samples fulfilling the requested performance specifications. It is important that end-users (i.e., clinical laboratory) may know and verify how in vitro diagnostics (IVD) manufacturers have implemented the traceability of their calibrators and estimated the corresponding uncertainty. However, full information about traceability and combined uncertainty of calibrators is currently very difficult to obtain. Laboratory professionals should investigate the need to reduce the uncertainty of the higher order metrological references and/or to increase the precision of commercial measuring systems. Accordingly, the measurement uncertainty should not be considered a parameter to be calculated by clinical laboratories just to fulfil the accreditation standards, but it must become a key quality indicator to describe both the performance of an IVD measuring system and the laboratory itself. Copyright © 2018 The Canadian Society of Clinical Chemists. Published by Elsevier Inc. All rights reserved.

Detector Based Realisation of Illuminance Scale at NML-SIRIM

NASA Astrophysics Data System (ADS)

Abdullah, Mohd Nizam; Abidin, Mohd Nasir Zainal; Abidin, Abdul Rashid Zainal; Shaari, Sahbudin

2009-07-01

Illuminance scale is one of the fundamentals in the realisation of candela in optical radiation. The en route of the realisation is based on the fundamental process from the unbroken chain of traceability which includes from the primary standard disseminated to working standard and lastly the end user. There are many variations towards this realisation even though some of the national metrology institutes (NMI) does not have the primary standard but their traceability still valid. The realisation of National Metrology Laboratory SIRIM (NML-SIRIM), Malaysia illuminance scale is based on detector. The scale is traceable to National Physical Labortaory (NPL), United Kingdom (UK) by annually calibrating photometers and luminous intensity lamp. This paper describes measurement method and the system set-up was previously crosschecked with Korea Research Institute Standards and Science (KRISS), Republic of Korea. The agreement between both laboratories is within 0.5% the uncertainty maintained at NML-SIRIM. Furthermore, the basic measurement equation for illuminance realisation is also derived.

A hybrid 2D/3D inspection concept with smart routing optimisation for high throughput, high dynamic range and traceable critical dimension metrology

NASA Astrophysics Data System (ADS)

Jones, Christopher W.; O’Connor, Daniel

2018-07-01

Dimensional surface metrology is required to enable advanced manufacturing process control for products such as large-area electronics, microfluidic structures, and light management films, where performance is determined by micrometre-scale geometry or roughness formed over metre-scale substrates. While able to perform 100% inspection at a low cost, commonly used 2D machine vision systems are insufficient to assess all of the functionally relevant critical dimensions in such 3D products on their own. While current high-resolution 3D metrology systems are able to assess these critical dimensions, they have a relatively small field of view and are thus much too slow to keep up with full production speeds. A hybrid 2D/3D inspection concept is demonstrated, combining a small field of view, high-performance 3D topography-measuring instrument with a large field of view, high-throughput 2D machine vision system. In this concept, the location of critical dimensions and defects are first registered using the 2D system, then smart routing algorithms and high dynamic range (HDR) measurement strategies are used to efficiently acquire local topography using the 3D sensor. A motion control platform with a traceable position referencing system is used to recreate various sheet-to-sheet and roll-to-roll inline metrology scenarios. We present the artefacts and procedures used to calibrate this hybrid sensor system for traceable dimensional measurement, as well as exemplar measurement of optically challenging industrial test structures.

Neutron activation analysis: A primary method of measurement

NASA Astrophysics Data System (ADS)

Greenberg, Robert R.; Bode, Peter; De Nadai Fernandes, Elisabete A.

2011-03-01

Neutron activation analysis (NAA), based on the comparator method, has the potential to fulfill the requirements of a primary ratio method as defined in 1998 by the Comité Consultatif pour la Quantité de Matière — Métrologie en Chimie (CCQM, Consultative Committee on Amount of Substance — Metrology in Chemistry). This thesis is evidenced in this paper in three chapters by: demonstration that the method is fully physically and chemically understood; that a measurement equation can be written down in which the values of all parameters have dimensions in SI units and thus having the potential for metrological traceability to these units; that all contributions to uncertainty of measurement can be quantitatively evaluated, underpinning the metrological traceability; and that the performance of NAA in CCQM key-comparisons of trace elements in complex matrices between 2000 and 2007 is similar to the performance of Isotope Dilution Mass Spectrometry (IDMS), which had been formerly designated by the CCQM as a primary ratio method.

Metrological approach to quantitative analysis of clinical samples by LA-ICP-MS: A critical review of recent studies.

PubMed

Sajnóg, Adam; Hanć, Anetta; Barałkiewicz, Danuta

2018-05-15

Analysis of clinical specimens by imaging techniques allows to determine the content and distribution of trace elements on the surface of the examined sample. In order to obtain reliable results, the developed procedure should be based not only on the properly prepared sample and performed calibration. It is also necessary to carry out all phases of the procedure in accordance with the principles of chemical metrology whose main pillars are the use of validated analytical methods, establishing the traceability of the measurement results and the estimation of the uncertainty. This review paper discusses aspects related to sampling, preparation and analysis of clinical samples by laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) with emphasis on metrological aspects, i.e. selected validation parameters of the analytical method, the traceability of the measurement result and the uncertainty of the result. This work promotes the introduction of metrology principles for chemical measurement with emphasis to the LA-ICP-MS which is the comparative method that requires studious approach to the development of the analytical procedure in order to acquire reliable quantitative results. Copyright © 2018 Elsevier B.V. All rights reserved.

Portable traceability solution for ground-based calibration of optical instruments

NASA Astrophysics Data System (ADS)

El Gawhary, Omar; van Veghel, Marijn; Kenter, Pepijn; van der Leden, Natasja; Dekker, Paul; Revtova, Elena; Heemskerk, Maurice; Trarbach, André; Vink, Ramon; Doyle, Dominic

2017-11-01

We present a portable traceability solution for the ground-based optical calibration of earth observation (EO) instruments. Currently, traceability for this type of calibration is typically based on spectral irradiance sources (e.g. FEL lamps) calibrated at a national metrology institute (NMI). Disadvantages of this source-based traceability are the inflexibility in operating conditions of the source, which are limited to the settings used during calibration at the NMI, and the susceptibility to aging, which requires frequent recalibrations, and which cannot be easily checked on-site. The detector-based traceability solution presented in this work uses a portable filter radiometer to calibrate light sources onsite, immediately before and after, or even during instrument calibration. The filter radiometer itself is traceable to the primary standard of radiometry in the Netherlands. We will discuss the design and realization, calibration and performance verification.

Accurate Radiometry from Space: An Essential Tool for Climate Studies

NASA Technical Reports Server (NTRS)

Fox, Nigel; Kaiser-Weiss, Andrea; Schmutz, Werner; Thome, Kurtis; Young, Dave; Wielicki, Bruce; Winkler, Rainer; Woolliams, Emma

2011-01-01

The Earth s climate is undoubtedly changing; however, the time scale, consequences and causal attribution remain the subject of significant debate and uncertainty. Detection of subtle indicators from a background of natural variability requires measurements over a time base of decades. This places severe demands on the instrumentation used, requiring measurements of sufficient accuracy and sensitivity that can allow reliable judgements to be made decades apart. The International System of Units (SI) and the network of National Metrology Institutes were developed to address such requirements. However, ensuring and maintaining SI traceability of sufficient accuracy in instruments orbiting the Earth presents a significant new challenge to the metrology community. This paper highlights some key measurands and applications driving the uncertainty demand of the climate community in the solar reflective domain, e.g. solar irradiances and reflectances/radiances of the Earth. It discusses how meeting these uncertainties facilitate significant improvement in the forecasting abilities of climate models. After discussing the current state of the art, it describes a new satellite mission, called TRUTHS, which enables, for the first time, high-accuracy SI traceability to be established in orbit. The direct use of a primary standard and replication of the terrestrial traceability chain extends the SI into space, in effect realizing a metrology laboratory in space . Keywords: climate change; Earth observation; satellites; radiometry; solar irradiance

Metrologically Traceable Determination of the Water Content in Biopolymers: INRiM Activity

NASA Astrophysics Data System (ADS)

Rolle, F.; Beltramino, G.; Fernicola, V.; Sega, M.; Verdoja, A.

2017-03-01

Water content in materials is a key factor affecting many chemical and physical properties. In polymers of biological origin, it influences their stability and mechanical properties as well as their biodegradability. The present work describes the activity carried out at INRiM on the determination of water content in samples of a commercial starch-derived biopolymer widely used in shopping bags (Mater-Bi^{circledR }). Its water content, together with temperature, is the most influencing parameter affecting its biodegradability, because of the considerable impact on the microbial activity which is responsible for the biopolymer degradation in the environment. The main scope of the work was the establishment of a metrologically traceable procedure for the determination of water content by using two electrochemical methods, namely coulometric Karl Fischer (cKF) titration and evolved water vapour (EWV) analysis. The obtained results are presented. The most significant operational parameters were considered, and a particular attention was devoted to the establishment of metrological traceability of the measurement results by using appropriate calibration procedures, calibrated standards and suitable certified reference materials. Sample homogeneity and oven-drying temperature were found to be the most important influence quantities in the whole water content measurement process. The results of the two methods were in agreement within the stated uncertainties. Further development is foreseen for the application of cKF and EWV to other polymers.

How to obtain traceability on optical radiation measurements?

NASA Astrophysics Data System (ADS)

Matamoros García, Carlos H.

2006-02-01

Traceability to national standards provides confidence in measurements results, granting a guaranty when carrying out governmental rules and when demonstrating conformity with quality requirements such as ISO 9000 or ISO/IEC 17025 (and the Mexican equivalent standards). The appropriate traceability contributes with confidence of the quality of products or services. This paper presents different ways to obtain traceability in Mexico for the optical radiation measurements, mentioning some applications, and highlighting the necessity of having traceability to the appropriate units of the SI. Additionally it present the national standards maintained by Centro Nacional de Metrologia (CENAM), the national metrology institute in Mexico, that give the technical support to Mexican measurements in this field and the international recognition that the personal of the Optics and Radiometry Division had gained in 10 years of development.

An Optical Frequency Comb Tied to GPS for Laser Frequency/Wavelength Calibration

PubMed Central

Stone, Jack A.; Egan, Patrick

2010-01-01

Optical frequency combs can be employed over a broad spectral range to calibrate laser frequency or vacuum wavelength. This article describes procedures and techniques utilized in the Precision Engineering Division of NIST (National Institute of Standards and Technology) for comb-based calibration of laser wavelength, including a discussion of ancillary measurements such as determining the mode order. The underlying purpose of these calibrations is to provide traceable standards in support of length measurement. The relative uncertainty needed to fulfill this goal is typically 10−8 and never below 10−12, very modest requirements compared to the capabilities of comb-based frequency metrology. In this accuracy range the Global Positioning System (GPS) serves as an excellent frequency reference that can provide the traceable underpinning of the measurement. This article describes techniques that can be used to completely characterize measurement errors in a GPS-based comb system and thus achieve full confidence in measurement results. PMID:27134794

SI-Traceable Water Content Measurements in Solids, Bulks, and Powders

NASA Astrophysics Data System (ADS)

Østergaard, Peter; Nielsen, Jan

2018-01-01

Methods such as Karl Fischer titration and Loss-on-Drying, commonly used for estimating moisture content in samples, have been in existence for many years, but have difficulties obtaining a direct calibration chain toward water content. In recognition of this challenge, the joint research project, METefnet, was funded by the European Metrology Research Programme in 2012. The goal of METefnet is to establish a European metrology infrastructure for water content measurement and to develop primary standards for unambiguous determination of water mass fraction in materials. Here, we describe the primary standard developed by Danish Technological Institute in METefnet. This standard establishes traceability of the water content of a sample to dewpoint temperature. The standard only measures water, and the measurement result is not affected by other components.

Joint Research on Scatterometry and AFM Wafer Metrology

NASA Astrophysics Data System (ADS)

Bodermann, Bernd; Buhr, Egbert; Danzebrink, Hans-Ulrich; Bär, Markus; Scholze, Frank; Krumrey, Michael; Wurm, Matthias; Klapetek, Petr; Hansen, Poul-Erik; Korpelainen, Virpi; van Veghel, Marijn; Yacoot, Andrew; Siitonen, Samuli; El Gawhary, Omar; Burger, Sven; Saastamoinen, Toni

2011-11-01

Supported by the European Commission and EURAMET, a consortium of 10 participants from national metrology institutes, universities and companies has started a joint research project with the aim of overcoming current challenges in optical scatterometry for traceable linewidth metrology. Both experimental and modelling methods will be enhanced and different methods will be compared with each other and with specially adapted atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurement systems in measurement comparisons. Additionally novel methods for sophisticated data analysis will be developed and investigated to reach significant reductions of the measurement uncertainties in critical dimension (CD) metrology. One final goal will be the realisation of a wafer based reference standard material for calibration of scatterometers.

The National Time and Frequency Service of the Russian Federation

DTIC Science & Technology

2004-09-01

Krutikov Gosstandard of Russia, Moscow 119991, Russia V. Kostromin and N. Koshelyaevsky Institute of Metrology for Time and Space FGUP “ VNIIFTRI ...Metrology for Time and Space FGUP VNIIFTRI Mendeleevo 141570, Russia 8. PERFORMING ORGANIZATION REPORT NUMBER 9. SPONSORING/MONITORING AGENCY NAME(S) AND...is supplied from reserved sources located in premises outside the main territory of VNIIFTRI . According to the State Traceability Chart for Time

Metrology for decommissioning nuclear facilities: Partial outcomes of joint research project within the European Metrology Research Program.

PubMed

Suran, Jiri; Kovar, Petr; Smoldasova, Jana; Solc, Jaroslav; Van Ammel, Raf; Garcia Miranda, Maria; Russell, Ben; Arnold, Dirk; Zapata-García, Daniel; Boden, Sven; Rogiers, Bart; Sand, Johan; Peräjärvi, Kari; Holm, Philip; Hay, Bruno; Failleau, Guillaume; Plumeri, Stephane; Laurent Beck, Yves; Grisa, Tomas

2018-04-01

Decommissioning of nuclear facilities incurs high costs regarding the accurate characterisation and correct disposal of the decommissioned materials. Therefore, there is a need for the implementation of new and traceable measurement technologies to select the appropriate release or disposal route of radioactive wastes. This paper addresses some of the innovative outcomes of the project "Metrology for Decommissioning Nuclear Facilities" related to mapping of contamination inside nuclear facilities, waste clearance measurement, Raman distributed temperature sensing for long term repository integrity monitoring and validation of radiochemical procedures. Copyright © 2017 Elsevier Ltd. All rights reserved.

PREFACE: 13th International Conference on Metrology and Properties of Engineering Surfaces

NASA Astrophysics Data System (ADS)

Leach, Richard

2011-08-01

The 13th International Conference on Metrology and Properties of Engineering Surfaces focused on the progress in surface metrology, surface characterisation instrumentation and properties of engineering surfaces. The conference provided an international forum for academics, industrialists and engineers from different disciplines to meet and exchange their ideas, results and latest research. The conference was held at Twickenham Stadium, situated approximately six miles from Heathrow Airport and approximately three miles from the National Physical Laboratory (NPL). This was the thirteenth in the very successful series of conferences, which have firmly established surface topography as a new and exciting interdisciplinary field of scientific and technological studies. Scientific Themes: Surface, Micro and Nano Metrology Measurement and Instrumentation Metrology for MST Devices Freeform Surface Measurement and Characterisation Uncertainty, Traceability and Calibration AFM/SPM Metrology Tribology and Wear Phenomena Functional Applications Stylus and Optical Instruments

FOREWORD: Materials metrology Materials metrology

NASA Astrophysics Data System (ADS)

Bennett, Seton; Valdés, Joaquin

2010-04-01

It seems that so much of modern life is defined by the materials we use. From aircraft to architecture, from cars to communications, from microelectronics to medicine, the development of new materials and the innovative application of existing ones have underpinned the technological advances that have transformed the way we live, work and play. Recognizing the need for a sound technical basis for drafting codes of practice and specifications for advanced materials, the governments of countries of the Economic Summit (G7) and the European Commission signed a Memorandum of Understanding in 1982 to establish the Versailles Project on Advanced Materials and Standards (VAMAS). This project supports international trade by enabling scientific collaboration as a precursor to the drafting of standards. The VAMAS participants recognized the importance of agreeing a reliable, universally accepted basis for the traceability of the measurements on which standards depend for their preparation and implementation. Seeing the need to involve the wider metrology community, VAMAS approached the Comité International des Poids et Mesures (CIPM). Following discussions with NMI Directors and a workshop at the BIPM in February 2005, the CIPM decided to establish an ad hoc Working Group on the metrology applicable to the measurement of material properties. The Working Group presented its conclusions to the CIPM in October 2007 and published its final report in 2008, leading to the signature of a Memorandum of Understanding between VAMAS and the BIPM. This MoU recognizes the work that is already going on in VAMAS as well as in the Consultative Committees of the CIPM and establishes a framework for an ongoing dialogue on issues of materials metrology. The question of what is meant by traceability in the metrology of the properties of materials is particularly vexed when the measurement results depend on a specified procedure. In these cases, confidence in results requires not only traceable calibration of the various instruments and standards used but also the reliable application of an accepted measurement procedure. Nowhere is this more evident than in the use of hardness scales, which are not directly traceable to the SI. This special issue of Metrologia includes a summary of the findings and conclusions of the Working Group and a further 14 papers covering the full range of properties of interest in science, engineering and standards making. It includes papers by authors at eight national measurement institutes and four other research centres. In addition to mechanical properties, there are papers addressing issues associated with the measurement of electromagnetic, acoustic and optical properties as well as those arising from the specific structural features of many new materials. As guest editors, we are extremely grateful to all the authors who have contributed to this special issue on the measurement of the properties of materials. We hope it will contribute to a wider appreciation of many of the associated issues and foster a growing understanding of the importance of ensuring that all such measurements are performed in accordance with accepted standards and procedures, with proper attention to the need to establish the traceability of the results. Only in this way can the performance, safety and fitness for purpose of products be guaranteed.

Standards fabrication to providing metrological traceability in micromass and nanoforce measurements results

NASA Astrophysics Data System (ADS)

Vargas Pereira, Thaiane; Beatrici, Anderson

2018-03-01

Some of the more sensitive weighing equipment available nowadays has its repeatability close to tenth of microgram. OIML characterize mass standards bigger them 1 mg, so in this range doesn’t exist direct traceability to the kg prototype. The ASTM has a characterization of mass standard 50, 100, 200 e 500 micrograms. This work have a purpose of providing traceability to mass measurement in microgram scale (nanonewton scale in force) with the confection and calibration of a standard weights collection. At this time were studied two materials, Tungsten and MetGlass2705M (MetGlass), and produced 12 mass standards.

TOPICAL REVIEW: Advances in traceable nanometrology at the National Physical Laboratory†Advances in traceable nanometrology at the National Physical Laboratory

NASA Astrophysics Data System (ADS)

Leach, Richard; Haycocks, Jane; Jackson, Keith; Lewis, Andrew; Oldfield, Simon; Yacoot, Andrew

2001-03-01

The only difference between nanotechnology and many other fields of science or engineering is that of size. Control in manufacturing at the nanometre scale still requires accurate and traceable measurements whether one is attempting to machine optical quality glass or write one's company name in single atoms. A number of instruments have been developed at the National Physical Laboratory that address the measurement requirements of the nanotechnology community and provide traceability to the definition of the metre. The instruments discussed in this paper are an atomic force microscope and a surface texture measuring instrument with traceable metrology in all their operational axes, a combined optical and x-ray interferometer system that can be used to calibrate displacement transducers to subnanometre accuracy and a co-ordinate measuring machine with a working volume of (50 mm)3 and 50 nm volumetric accuracy.

High pressure metrology for industrial applications

NASA Astrophysics Data System (ADS)

Sabuga, Wladimir; Rabault, Thierry; Wüthrich, Christian; Pražák, Dominik; Chytil, Miroslav; Brouwer, Ludwig; Ahmed, Ahmed D. S.

2017-12-01

To meet the needs of industries using high pressure technologies, in traceable, reliable and accurate pressure measurements, a joint research project of the five national metrology institutes and the university was carried out within the European Metrology Research Programme. In particular, finite element methods were established for stress-strain analysis of elastic and nonlinear elastic-plastic deformation, as well as of contact processes in pressure-measuring piston-cylinder assemblies, and high-pressure components at pressures above 1 GPa. New pressure measuring multipliers were developed and characterised, which allow realisation of the pressure scale up to 1.6 GPa. This characterisation is based on research including measurements of material elastic constants by the resonant ultrasound spectroscopy, hardness of materials of high pressure components, density and viscosity of pressure transmitting liquids at pressures up to 1.4 GPa and dimensional measurements on piston-cylinders. A 1.6 GPa pressure system was created for operation of the 1.6 GPa multipliers and calibration of high pressure transducers. A transfer standard for 1.5 GPa pressure range, based on pressure transducers, was built and tested. Herewith, the project developed the capability of measuring pressures up to 1.6 GPa, from which industrial users can calibrate their pressure measurement devices for accurate measurements up to 1.5 GPa.

Recent developments in dimensional nanometrology using AFMs

NASA Astrophysics Data System (ADS)

Yacoot, Andrew; Koenders, Ludger

2011-12-01

Scanning probe microscopes, in particular the atomic force microscope (AFM), have developed into sophisticated instruments that, throughout the world, are no longer used just for imaging, but for quantitative measurements. A role of the national measurement institutes has been to provide traceable metrology for these instruments. This paper presents a brief overview as to how this has been achieved, highlights the future requirements for metrology to support developments in AFM technology and describes work in progress to meet this need.

Mycotoxin metrology: Gravimetric production of zearalenone calibration solution

NASA Astrophysics Data System (ADS)

Rego, E. C. P.; Simon, M. E.; Li, Xiuqin; Li, Xiaomin; Daireaux, A.; Choteau, T.; Westwood, S.; Josephs, R. D.; Wielgosz, R. I.; Cunha, V. S.

2018-03-01

Food safety is a major concern for countries developing metrology and quality assurance systems, including the contamination of food and feed by mycotoxins. To improve the mycotoxin analysis and ensure the metrological traceability, CRM of calibration solution should be used. The production of certified mycotoxin solutions is a major challenge due to the limited amount of standard for conducting a proper purity study and due to the cost of standards. The CBKT project was started at BIPM and Inmetro produced gravimetrically one batch of zearelenone in acetronitrile (14.708 ± 0.016 μg/g, k=2) and conducted homogeneity, stability and value assignment studies.

Emergency radiobioassay preparedness exercises through the NIST radiochemistry intercomparison program.

PubMed

Nour, Svetlana; LaRosa, Jerry; Inn, Kenneth G W

2011-08-01

The present challenge for the international emergency radiobioassay community is to analyze contaminated samples rapidly while maintaining high quality results. The National Institute of Standards and Technology (NIST) runs a radiobioassay measurement traceability testing program to evaluate the radioanalytical capabilities of participating laboratories. The NIST Radiochemistry Intercomparison Program (NRIP) started more than 10 years ago, and emergency performance testing was added to the program seven years ago. Radiobioassay turnaround times under the NRIP program for routine production and under emergency response scenarios are 60 d and 8 h, respectively. Because measurement accuracy and sample turnaround time are very critical in a radiological emergency, response laboratories' analytical systems are best evaluated and improved through traceable Performance Testing (PT) programs. The NRIP provides participant laboratories with metrology tools to evaluate their performance and to improve it. The program motivates the laboratories to optimize their methodologies and minimize the turnaround time of their results. Likewise, NIST has to make adjustments and periodical changes in the bioassay test samples in order to challenge the participating laboratories continually. With practice, radioanalytical measurements turnaround time can be reduced to 3-4 h.

Traceable Calibration, Performance Metrics, and Uncertainty Estimates of Minirhizotron Digital Imagery for Fine-Root Measurements

PubMed Central

Roberti, Joshua A.; SanClements, Michael D.; Loescher, Henry W.; Ayres, Edward

2014-01-01

Even though fine-root turnover is a highly studied topic, it is often poorly understood as a result of uncertainties inherent in its sampling, e.g., quantifying spatial and temporal variability. While many methods exist to quantify fine-root turnover, use of minirhizotrons has increased over the last two decades, making sensor errors another source of uncertainty. Currently, no standardized methodology exists to test and compare minirhizotron camera capability, imagery, and performance. This paper presents a reproducible, laboratory-based method by which minirhizotron cameras can be tested and validated in a traceable manner. The performance of camera characteristics was identified and test criteria were developed: we quantified the precision of camera location for successive images, estimated the trueness and precision of each camera's ability to quantify root diameter and root color, and also assessed the influence of heat dissipation introduced by the minirhizotron cameras and electrical components. We report detailed and defensible metrology analyses that examine the performance of two commercially available minirhizotron cameras. These cameras performed differently with regard to the various test criteria and uncertainty analyses. We recommend a defensible metrology approach to quantify the performance of minirhizotron camera characteristics and determine sensor-related measurement uncertainties prior to field use. This approach is also extensible to other digital imagery technologies. In turn, these approaches facilitate a greater understanding of measurement uncertainties (signal-to-noise ratio) inherent in the camera performance and allow such uncertainties to be quantified and mitigated so that estimates of fine-root turnover can be more confidently quantified. PMID:25391023

Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology

NASA Astrophysics Data System (ADS)

Dai, Gaoliang; Koenders, Ludger; Fluegge, Jens; Hemmleb, Matthias

2018-05-01

Low measurement speed remains a major shortcoming of the scanning probe microscopic technique. It not only leads to a low measurement throughput, but a significant measurement drift over the long measurement time needed (up to hours or even days). To overcome this challenge, PTB, the national metrology institute of Germany, has developed a high-speed metrological large-range atomic force microscope (HS Met. LR-AFM) capable of measuring speeds up to 1 mm s‑1. This paper has introduced the design concept in detail. After modelling scanning probe microscopic measurements, our results suggest that the signal spectrum of the surface to be measured is the spatial spectrum of the surface scaled by the scanning speed. The higher the scanning speed , the broader the spectrum to be measured. To realise an accurate HS Met. LR-AFM, our solution is to combine different stages/sensors synchronously in measurements, which provide a much larger spectrum area for high-speed measurement capability. Two application examples have been demonstrated. The first is a new concept called reference areal surface metrology. Using the developed HS Met. LR-AFM, surfaces are measured accurately and traceably at a speed of 500 µm s‑1 and the results are applied as a reference 3D data map of the surfaces. By correlating the reference 3D data sets and 3D data sets of tools under calibration, which are measured at the same surface, it has the potential to comprehensively characterise the tools, for instance, the spectrum properties of the tools. The investigation results of two commercial confocal microscopes are demonstrated, indicating very promising results. The second example is the calibration of a kind of 3D nano standard, which has spatially distributed landmarks, i.e. special unique features defined by 3D-coordinates. Experimental investigations confirmed that the calibration accuracy is maintained at a measurement speed of 100 µm s‑1, which improves the calibration efficiency by a factor of 10.

Metrology in physics, chemistry, and biology: differing perceptions.

PubMed

Iyengar, Venkatesh

2007-04-01

The association of physics and chemistry with metrology (the science of measurements) is well documented. For practical purposes, basic metrological measurements in physics are governed by two components, namely, the measure (i.e., the unit of measurement) and the measurand (i.e., the entity measured), which fully account for the integrity of a measurement process. In simple words, in the case of measuring the length of a room (the measurand), the SI unit meter (the measure) provides a direct answer sustained by metrological concepts. Metrology in chemistry, as observed through physical chemistry (measures used to express molar relationships, volume, pressure, temperature, surface tension, among others) follows the same principles of metrology as in physics. The same basis percolates to classical analytical chemistry (gravimetry for preparing high-purity standards, related definitive analytical techniques, among others). However, certain transition takes place in extending the metrological principles to chemical measurements in complex chemical matrices (e.g., food samples), as it adds a third component, namely, indirect measurements (e.g., AAS determination of Zn in foods). This is a practice frequently used in field assays, and calls for additional steps to account for traceability of such chemical measurements for safeguarding reliability concerns. Hence, the assessment that chemical metrology is still evolving.

Quantifying Human Response: Linking metrological and psychometric characterisations of Man as a Measurement Instrument

NASA Astrophysics Data System (ADS)

Pendrill, L. R.; Fisher, William P., Jr.

2013-09-01

A better understanding of how to characterise human response is essential to improved person-centred care and other situations where human factors are crucial. Challenges to introducing classical metrological concepts such as measurement uncertainty and traceability when characterising Man as a Measurement Instrument include the failure of many statistical tools when applied to ordinal measurement scales and a lack of metrological references in, for instance, healthcare. The present work attempts to link metrological and psychometric (Rasch) characterisation of Man as a Measurement Instrument in a study of elementary tasks, such as counting dots, where one knows independently the expected value because the measurement object (collection of dots) is prepared in advance. The analysis is compared and contrasted with recent approaches to this problem by others, for instance using signal error fidelity.

Experimental and Metrological Basis for SI-Traceable Infrared Radiance Measurements From Space

NASA Astrophysics Data System (ADS)

Gero, P. J.; Dykema, J. A.; Anderson, J. G.; Leroy, S. S.

2007-12-01

In order to establish a climate benchmark record and to be useful in interdecadal climate forecast testing, satellite measurements of high spectral resolution infrared radiance must have uncertainty estimates that can be proven beyond a doubt. An uncertainty in radiance of about 1 part in 1000 is required for climate applications. This can be accomplished by appealing to the best measurement practices of the metrology community. The International System of Units (SI) are linked to fundamental physical properties of matter, and can be realized anywhere in the world without bias. By doing so, one can make an accurate observation to within a specified uncertainty. Achieving SI-traceable radiance measurements from space is a novel requirement, and requires specialized sensor design and a disciplined experimental approach. Infrared remote sensing satellite instruments typically employ blackbody calibration targets, which are tied to the SI through Planck's law and the definition of the Kelvin. The blackbody temperature and emissivity, however, must be determined accurately on- orbit, in order for the blackbody emission scale to be SI-traceable. We outline a methodology of instrument design, pre-flight calibration and on-orbit diagnostics for realizing SI- traceable infrared radiance measurements. This instrument is intended as a component of the Climate Absolute Radiance and Refractivity Earth Observatory (CLARREO), a high priority recommendation of the National Research Council decadal survey. Calibration blackbodies for remote sensing differ from a perfect Planckian blackbody; thus the component uncertainties must be evaluated in order to confer traceability. We have performed traceability experiments in the laboratory to verify blackbody temperature, emissivity and the end-to-end radiance scale. We discuss the design of the Harvard standard blackbody and an intercomparison campaign that will be conducted with the GIFTS blackbody (University of Wisconsin, Madison) and radiometric calibration facilities at NIST. The GIFTS blackbody is a high-performance space-qualified design with a new generation of on-orbit thermometer calibration via miniaturized fixed point cells. NIST facilities allow the step-by-step measurement of blackbody surface properties, thermal properties, on-axis emissivity, and end-to-end radiometric performance. These activities will lay the experimental groundwork for achieving SI-traceable infrared radiance measurements on a satellite instrument.

The research progress of metrological 248nm deep ultraviolent microscope inspection device

NASA Astrophysics Data System (ADS)

Wang, Zhi-xin; Li, Qi; Gao, Si-tian; Shi, Yu-shu; Li, Wei; Li, Shi

2016-01-01

In lithography process, the precision of wafer pattern to a large extent depends on the geometric dimensioning and tolerance of photomasks when accuracy of lithography aligner is certain. Since the minimum linewidth (Critical Dimension) of the aligner exposing shrinks to a few tens of nanometers in size, one-tenth of tolerance errors in fabrication may lead to microchip function failure, so it is very important to calibrate these errors of photomasks. Among different error measurement instruments, deep ultraviolent (DUV) microscope because of its high resolution, as well as its advantages compared to scanning probe microscope restrained by measuring range and scanning electron microscope restrained by vacuum environment, makes itself the most suitable apparatus. But currently there is very few DUV microscope adopting 248nm optical system, means it can attain 80nm resolution; furthermore, there is almost no DUV microscope possessing traceable calibration capability. For these reason, the National Institute of Metrology, China is developing a metrological 248nm DUV microscope mainly consists of DUV microscopic components, PZT and air supporting stages as well as interferometer calibration framework. In DUV microscopic component, the Köhler high aperture transmit condenser, DUV splitting optical elements and PMT pinhole scanning elements are built. In PZT and air supporting stages, a novel PZT actuating flexural hinge stage nested separate X, Y direction kinematics and a friction wheel driving long range air supporting stage are researched. In interferometer framework, a heterodyne multi-pass interferometer measures XY axis translation and Z axis rotation through Zerodur mirror mounted on stage. It is expected the apparatus has the capability to calibrate one dimensional linewidths and two dimensional pitches ranging from 200nm to 50μm with expanded uncertainty below 20nm.

Metrology in health: a pilot study

NASA Astrophysics Data System (ADS)

Ferreira, M.; Matos, A.

2015-02-01

The purpose of this paper is to identify and analyze some relevant issues which arise when the concept of metrological traceability is applied to health care facilities. Discussion is structured around the results that were obtained through a characterization and comparative description of the practices applied in 45 different Portuguese health entities. Following a qualitative exploratory approach, the information collected was the support for the initial research hypotheses and the development of the questionnaire survey. It was also applied a quantitative methodology that included a descriptive and inferential statistical analysis of the experimental data set.

Primary standards for measuring flow rates from 100 nl/min to 1 ml/min - gravimetric principle.

PubMed

Bissig, Hugo; Petter, Harm Tido; Lucas, Peter; Batista, Elsa; Filipe, Eduarda; Almeida, Nelson; Ribeiro, Luis Filipe; Gala, João; Martins, Rui; Savanier, Benoit; Ogheard, Florestan; Niemann, Anders Koustrup; Lötters, Joost; Sparreboom, Wouter

2015-08-01

Microflow and nanoflow rate calibrations are important in several applications such as liquid chromatography, (scaled-down) process technology, and special health-care applications. However, traceability in the microflow and nanoflow range does not go below 16 μl/min in Europe. Furthermore, the European metrology organization EURAMET did not yet validate this traceability by means of an intercomparison between different National Metrology Institutes (NMIs). The NMIs METAS, Centre Technique des Industries Aérauliques et Thermiques, IPQ, Danish Technological Institute, and VSL have therefore developed and validated primary standards to cover the flow rate range from 0.1 μl/min to at least 1 ml/min. In this article, we describe the different designs and methods of the primary standards of the gravimetric principle and the results obtained at the intercomparison for the upper flow rate range for the various NMIs and Bronkhorst High-Tech, the manufacturer of the transfer standards used.

Visualizing and Validating Metadata Traceability within the CDISC Standards.

PubMed

Hume, Sam; Sarnikar, Surendra; Becnel, Lauren; Bennett, Dorine

2017-01-01

The Food & Drug Administration has begun requiring that electronic submissions of regulated clinical studies utilize the Clinical Data Information Standards Consortium data standards. Within regulated clinical research, traceability is a requirement and indicates that the analysis results can be traced back to the original source data. Current solutions for clinical research data traceability are limited in terms of querying, validation and visualization capabilities. This paper describes (1) the development of metadata models to support computable traceability and traceability visualizations that are compatible with industry data standards for the regulated clinical research domain, (2) adaptation of graph traversal algorithms to make them capable of identifying traceability gaps and validating traceability across the clinical research data lifecycle, and (3) development of a traceability query capability for retrieval and visualization of traceability information.

Visualizing and Validating Metadata Traceability within the CDISC Standards

PubMed Central

Hume, Sam; Sarnikar, Surendra; Becnel, Lauren; Bennett, Dorine

2017-01-01

The Food & Drug Administration has begun requiring that electronic submissions of regulated clinical studies utilize the Clinical Data Information Standards Consortium data standards. Within regulated clinical research, traceability is a requirement and indicates that the analysis results can be traced back to the original source data. Current solutions for clinical research data traceability are limited in terms of querying, validation and visualization capabilities. This paper describes (1) the development of metadata models to support computable traceability and traceability visualizations that are compatible with industry data standards for the regulated clinical research domain, (2) adaptation of graph traversal algorithms to make them capable of identifying traceability gaps and validating traceability across the clinical research data lifecycle, and (3) development of a traceability query capability for retrieval and visualization of traceability information. PMID:28815125

EDITORIAL: Nanoscale metrology Nanoscale metrology

NASA Astrophysics Data System (ADS)

Klapetek, P.; Koenders, L.

2011-09-01

This special issue of Measurement Science and Technology presents selected contributions from the NanoScale 2010 seminar held in Brno, Czech Republic. It was the 5th Seminar on Nanoscale Calibration Standards and Methods and the 9th Seminar on Quantitative Microscopy (the first being held in 1995). The seminar was jointly organized with the Czech Metrology Institute (CMI) and the Nanometrology Group of the Technical Committee-Length of EURAMET. There were two workshops that were integrated into NanoScale 2010: first a workshop presenting the results obtained in NANOTRACE, a European Metrology Research Project (EMRP) on displacement-measuring optical interferometers, and second a workshop about the European metrology landscape in nanometrology related to thin films, scanning probe microscopy and critical dimension. The aim of this workshop was to bring together developers, applicants and metrologists working in this field of nanometrology and to discuss future needs. For more information see www.co-nanomet.eu. The articles in this special issue of Measurement Science and Technology cover some novel scientific results. This issue can serve also as a representative selection of topics that are currently being investigated in the field of European and world-wide nanometrology. Besides traditional topics of dimensional metrology, like development of novel interferometers or laser stabilization techniques, some novel interesting trends in the field of nanometrology are observed. As metrology generally reflects the needs of scientific and industrial research, many research topics addressed refer to current trends in nanotechnology, too, focusing on traceability and improved measurement accuracy in this field. While historically the most studied standards in nanometrology were related to simple geometric structures like step heights or 1D or 2D gratings, now we are facing tasks to measure 3D structures and many unforeseen questions arising from interesting physical properties of nanoparticles, nanotubes, quantum dots and similar fascinating objects. Currently there is a high level of interest in characterization of nanoparticles since they are increasingly encountered in science, technology, life sciences and even everyday life. Quantitative characterization of nanoparticles has been the subject of many discussions and some recent work over the last couple of years, and both scanning probe microscopy and scanning or transmission electron microscopy characterization of nanoparticles are presented here. There is also a continuous need for improvement of scanning probe microscopy that is a basic tool for nanometrology. Increasing thermal stability, scanning speed and tip stability, improving traceability and reducing uncertainty are all areas being addressed. As scanning probe microscopy is essentially based on force measurements in the nano- and piconewton range, we take notice of large developments, both theoretical and experimental, in the field of traceable measurements of nanoscale forces. This will greatly increase the understanding and quantification of many basic phenomena in scanning probe microscopy. Finally, we observe that high resolution techniques for acquiring more than just morphology are slowly shifting from purely qualitative tools to well defined quantitative methods. Lack of simple and reliable chemical identification in scanning probe microscopy is compensated by many other local probing methods seen in commercial microscopes, like scanning thermal microscopy or the Kelvin probe technique. All these methods still require underpinning with theoretical and experimental work before they can become traceable analytical methods; however, the increased interest in the metrology community gives rise to optimism in this field. The production of this issue involved considerable effort from many contributors. We would like to thank all the authors for their contributions, the referees for their time spent reviewing the contributions and their valuable comments, and the whole Editorial Board of Measurement Science and Technology for their support.

EMRP JRP MetNH3: Towards a Consistent Metrological Infrastructure for Ammonia Measurements in Ambient Air

NASA Astrophysics Data System (ADS)

Leuenberger, Daiana; Balslev-Harder, David; Braban, Christine F.; Ebert, Volker; Ferracci, Valerio; Gieseking, Bjoern; Hieta, Tuomas; Martin, Nicholas A.; Pascale, Céline; Pogány, Andrea; Tiebe, Carlo; Twigg, Marsailidh M.; Vaittinen, Olavi; van Wijk, Janneke; Wirtz, Klaus; Niederhauser, Bernhard

2016-04-01

Measuring ammonia in ambient air is a sensitive and priority issue due to its harmful effects on human health and ecosystems. In addition to its acidifying effect on natural waters and soils and to the additional nitrogen input to ecosystems, ammonia is an important precursor for secondary aerosol formation in the atmosphere. The European Directive 2001/81/EC on "National Emission Ceilings for Certain Atmospheric Pollutants (NEC)" regulates ammonia emissions in the member states. However, there is a lack of regulation regarding certified reference material (CRM), applicable analytical methods, measurement uncertainty, quality assurance and quality control (QC/QA) procedures as well as in the infrastructure to attain metrological traceability. As shown in a key comparison in 2007, there are even discrepancies between reference materials provided by European National Metrology Institutes (NMIs) at amount fraction levels up to three orders of magnitude higher than ambient air levels. MetNH3 (Metrology for ammonia in ambient air), a three-year project that started in June 2014 in the framework of the European Metrology Research Programme (EMRP), aims to reduce the gap between requirements set by the European emission regulations and state-of-the-art of analytical methods and reference materials. The overarching objective of the JRP is to achieve metrological traceability for ammonia measurements in ambient air from primary certified reference material CRM and instrumental standards to the field level. This requires the successful completion of the three main goals, which have been assigned to three technical work packages: To develop improved reference gas mixtures by static and dynamic gravimetric generation methods Realisation and characterisation of traceable preparative calibration standards (in pressurised cylinders as well as mobile generators) of ammonia amount fractions similar to those in ambient air based on existing methods for other reactive analytes. The aimed uncertainty is < 1 % for static mixtures at the 10 to 100 μmol/mol level, and < 3 % for portable dynamic generators in the 0 to 500 nmol/mol amount fraction range. Special emphasis is put on the minimisation of adsorption losses. To develop and characterise laser based optical spectrometric standards Evaluation and characterisation of the applicability of a newly developed open-path as well as of existing extractive measurement techniques as optical transfer standards according to metrological standards. To establish the transfer from high-accuracy standards to field applicable methods Employment of characterised exposure chambers as well as field sites for validation and comparison experiments to test and evaluate the performance of different instruments and measurement methods at ammonia amount fractions of the ambient air. The active exchange in workshops and inter-comparisons, publications in technical journals as well as presentations at relevant conferences and standardisation bodies will transfer the knowledge to stakeholders and end-users. The work has been carried out in the framework of the EMRP. The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union.

Metrology of airborne and liquid-borne nanoparticles: current status and future needs

NASA Astrophysics Data System (ADS)

Ehara, Kensei; Sakurai, Hiromu

2010-04-01

The current status and future needs of nanoparticle metrology are discussed, particularly with respect to measurements of size, size distribution and number concentration of airborne and liquid-borne nanoparticles. Possible classification of types of measurement standards is proposed, and the role of each type of standard, including the feasibility of its establishment, is examined. A desirable interplay between measurement standards and documentary standards in establishing the traceability chain in particle measurements is suggested. Particle-related calibration services currently provided by our laboratory at the National Institute of Advanced Industrial Science and Technology are also described.

Assessing the Analytical Performance of Systems for Self-Monitoring of Blood Glucose: Concepts of Performance Evaluation and Definition of Metrological Key Terms

PubMed Central

Schnell, Oliver; Hinzmann, Rolf; Kulzer, Bernd; Freckmann, Guido; Erbach, Michael; Lodwig, Volker; Heinemann, Lutz

2013-01-01

Reliability of blood glucose (BG) measurements is a prerequisite for successful diabetes management. Publications on the evaluation of self-monitored glucose values, however, are frequently characterized by a confusion in terminology. We provide an inventory of key terms such as accuracy, trueness, precision, traceability, calibration, and matrix effect to avoid future misunderstanding. Definitions are taken from the metrological literature and international norms and explained in a language intended for nonspecialists in metrology. The terms are presented in light of the need to apply generally accepted definitions. In addition, a description of requirements and components for a sound evaluation of BG measurement systems is presented. These factors will also enable improvement in future comparisons of study results. PMID:24351185

Metrologies for quantitative nanomechanical testing and quality control in semiconductor manufacturing

NASA Astrophysics Data System (ADS)

Pratt, Jon R.; Kramar, John A.; Newell, David B.; Smith, Douglas T.

2005-05-01

If nanomechanical testing is to evolve into a tool for process and quality control in semiconductor fabrication, great advances in throughput, repeatability, and accuracy of the associated instruments and measurements will be required. A recent grant awarded by the NIST Advanced Technology Program seeks to address the throughput issue by developing a high-speed AFM-based platform for quantitative nanomechanical measurements. The following paper speaks to the issue of quantitative accuracy by presenting an overview of various standards and techniques under development at NIST and other national metrology institutes (NMIs) that can provide a metrological basis for nanomechanical testing. The infrastructure we describe places firm emphasis on traceability to the International System of Units, paving the way for truly quantitative, rather than qualitative, physical property testing.

Overcoming the Invisibility of Metrology: A Reading Measurement Network for Education and the Social Sciences

NASA Astrophysics Data System (ADS)

Fisher, William P., Jr.; Stenner, A. Jackson

2013-09-01

The public and researchers in psychology and the social sciences are largely unaware of the huge resources invested in metrology and standards in science and commerce, for understandable reasons, but with unfortunate consequences. Measurement quality varies widely in fields lacking uniform standards, making it impossible to coordinate local behaviours and decisions in tune with individually observed instrument readings. However, recent developments in reading measurement have effectively instituted metrological traceability methods within elementary and secondary English and Spanish language reading education in the U.S., Canada, Mexico, and Australia. Given established patterns in the history of science, it may be reasonable to expect that widespread routine reproduction of controlled effects expressed in uniform units in the social sciences may lead to significant developments in theory and practice.

A metrological approach to improve accuracy and reliability of ammonia measurements in ambient air

NASA Astrophysics Data System (ADS)

Pogány, Andrea; Balslev-Harder, David; Braban, Christine F.; Cassidy, Nathan; Ebert, Volker; Ferracci, Valerio; Hieta, Tuomas; Leuenberger, Daiana; Martin, Nicholas A.; Pascale, Céline; Peltola, Jari; Persijn, Stefan; Tiebe, Carlo; Twigg, Marsailidh M.; Vaittinen, Olavi; van Wijk, Janneke; Wirtz, Klaus; Niederhauser, Bernhard

2016-11-01

The environmental impacts of ammonia (NH3) in ambient air have become more evident in the recent decades, leading to intensifying research in this field. A number of novel analytical techniques and monitoring instruments have been developed, and the quality and availability of reference gas mixtures used for the calibration of measuring instruments has also increased significantly. However, recent inter-comparison measurements show significant discrepancies, indicating that the majority of the newly developed devices and reference materials require further thorough validation. There is a clear need for more intensive metrological research focusing on quality assurance, intercomparability and validations. MetNH3 (Metrology for ammonia in ambient air) is a three-year project within the framework of the European Metrology Research Programme (EMRP), which aims to bring metrological traceability to ambient ammonia measurements in the 0.5-500 nmol mol-1 amount fraction range. This is addressed by working in three areas: (1) improving accuracy and stability of static and dynamic reference gas mixtures, (2) developing an optical transfer standard and (3) establishing the link between high-accuracy metrological standards and field measurements. In this article we describe the concept, aims and first results of the project.

Forensic Metrology: Its Importance and Evolution in the United States

NASA Astrophysics Data System (ADS)

Vosk, JD Ted

2016-11-01

Forensic measurements play a significant role in the U.S. criminal justice system. Guilt or innocence, or the severity of a sentence, may depend upon the results of such measurements. Until recently, however, forensic disciplines were largely unaware of the field of metrology. Accordingly, proper measurement practices were often, and widely, neglected. These include failure to adopt proper calibration techniques, establish the traceability of results and determine measurement uncertainty. These failures undermine confidence in verdicts based upon forensic measurements. Over the past decade, though, the forensic sciences have been introduced to metrology and its principles leading to more reliable measurement practices. The impetus for this change was driven by many forces. Pressure came initially from criminal defense lawyers challenging metrologically unsound practices and results relied upon by government prosecutions. Litigation in the State of Washington led this movement spurring action by attorneys in other jurisdictions and eventually reform in the measurement practices of forensic labs around the country. Since then, the greater scientific community, other forensic scientists and even prosecutors have joined the fight. This paper describes the fight to improve the quality of justice by the application of metrological principles and the evolution of the field of forensic metrology.

Coordinate metrology of a primary surface composite panel from the Large Millimeter Telescope

NASA Astrophysics Data System (ADS)

Gale, David M.; Lucero Álvarez, Maribel; Cabrera Cuevas, Lizeth; Leon-Huerta, Andrea; Arizmendi Reyes, Edgar; Icasio Hernández, Octavio; Castro Santos, David; Hernández Ríos, Emilio; Tecuapetla Sosa, Esteban; Tzile Torres, Carlos; Viliesid Alonso, Miguel

2016-07-01

The Large Millimeter Telescope (LMT) is a single-dish fully-steerable radio telescope presently operating with a 32.5 m parabolic primary reflector, in the process of extension to 50 m. The project is managed by the Instituto Nacional de Astrofísica, Óptica y Electrónica (INAOE) in México, and the University of Massachusetts Amherst, USA. A laminated surface panel from the LMT primary reflector has been subjected to a surface measurement assay at Mexico's National Metrology Center (CENAM). Data obtained using a coordinate measuring machine and laser tracker owned by CENAM is compared with measurements using an identical model laser tracker and the photogrammetry technique, the latter systems owned and operated by the LMT. All measurements were performed within the controlled metrology environment at CENAM. The measurement exercise is intended to prepare the groundwork for converting this spare surface panel into a calibrated work-piece. The establishment of a calibrated work-piece provides quality assurance for metrology through measurement traceability. It also simplifies the evaluation of measurement uncertainty for coordinate metrology procedures used by the LMT project during reflector surface qualification.

Traceable measurements of small forces and local mechanical properties

NASA Astrophysics Data System (ADS)

Campbellová, Anna; Valtr, Miroslav; Zůda, Jaroslav; Klapetek, Petr

2011-09-01

Measurement of local mechanical properties is an important topic in the fields of nanoscale device fabrication, thin film deposition and composite material development. Nanoindentation instruments are commonly used to study hardness and related mechanical properties at the nanoscale. However, traceability and uncertainty aspects of the measurement process often remain left aside. In this contribution, the use of a commercial nanoindentation instrument for metrology purposes will be discussed. Full instrument traceability, provided using atomic force microscope cantilevers and a mass comparator (normal force), interferometer (depth) and atomic force microscope (area function) is described. The uncertainty of the loading/unloading curve measurements will be analyzed and the resulting uncertainties for quantities, that are computed from loading curves such as hardness or elastic modulus, are studied. For this calculation a combination of uncertainty propagation law and Monte Carlo uncertainty evaluations are used.

Reliability of an x-ray system for calibrating and testing personal radiation dosimeters

NASA Astrophysics Data System (ADS)

Guimarães, M. C.; Silva, C. R. E.; Rosado, P. H. G.; Cunha, P. G.; Da Silva, T. A.

2018-03-01

Metrology laboratories are expected to maintain standardized radiation beams and traceable standard dosimeters to provide reliable calibrations or testing of detectors. Results of the characterization of an x-ray system for performing calibration and testing of radiation dosimeters used for individual monitoring are shown in this work.

Legal Time of the Republic of Colombia and its international traceability using the Cesium Atomic Clock - Time and Frequency National Standard

NASA Astrophysics Data System (ADS)

Hernández Forero, Liz Catherine; Bahamón Cortés, Nelson

2017-06-01

Around the world, there are different providers of timestamp (mobile, radio or television operators, satellites of the GPS network, astronomical measurements, etc.), however, the source of the legal time for a country is either the national metrology institute or another designated laboratory. This activity requires a time standard based on an atomic time scale. The International Bureau of Weights and Measures (BIPM) calculates a weighted average of the time kept in more than 60 nations and produces a single international time scale, called Coordinated Universal Time (UTC). This article presents the current time scale that generates Legal Time for the Republic of Colombia produced by the Instituto Nacional de Metrología (INM) using the time and frequency national standard, a cesium atomic oscillator. It also illustrates how important it is for the academic, scientific and industrial communities, as well as the general public, to be synchronized with this time scale, which is traceable to the International System (SI) of units, through international comparisons that are made in real time.

EMPRESS: A European Project to Enhance Process Control Through Improved Temperature Measurement

NASA Astrophysics Data System (ADS)

Pearce, J. V.; Edler, F.; Elliott, C. J.; Rosso, L.; Sutton, G.; Andreu, A.; Machin, G.

2017-08-01

A new European project called EMPRESS, funded by the EURAMET program `European Metrology Program for Innovation and Research,' is described. The 3 year project, which started in the summer of 2015, is intended to substantially augment the efficiency of high-value manufacturing processes by improving temperature measurement techniques at the point of use. The project consortium has 18 partners and 5 external collaborators, from the metrology sector, high-value manufacturing, sensor manufacturing, and academia. Accurate control of temperature is key to ensuring process efficiency and product consistency and is often not achieved to the level required for modern processes. Enhanced efficiency of processes may take several forms including reduced product rejection/waste; improved energy efficiency; increased intervals between sensor recalibration/maintenance; and increased sensor reliability, i.e., reduced amount of operator intervention. Traceability of temperature measurements to the International Temperature Scale of 1990 (ITS-90) is a critical factor in establishing low measurement uncertainty and reproducible, consistent process control. Introducing such traceability in situ (i.e., within the industrial process) is a theme running through this project.

FOREWORD: Special issue on radionuclide metrology

NASA Astrophysics Data System (ADS)

Simpson, Bruce; Judge, Steven

2007-08-01

This special issue of Metrologia on radionuclide metrology is the first of a trilogy on the subject of ionizing radiation measurement, a field that is overseen by Sections I, II and III of the CIPM's Consultative Committee for Ionizing Radiation (CCRI). The idea was first proposed at the 2003 series of CCRI Section meetings, with the general aim of showcasing the relevance and importance of metrology in ionizing radiation to a broader metrological audience. After the 2005 meeting of Section II (measurement of radionuclides), the radioactivity aspect of the project began to move forward in earnest. A working group was set up with the brief that the special issue should be of use by experienced metrologists as an overview of the 'state of the art' to compare progress and scientific content with those in other fields of metrology, as a resource for new metrologists joining the field and as a guide for users of radioactivity to explain how traceability to the international measurement system may be achieved. Since mankind first became aware of the existence of radioactivity just over a century ago (due to its discovery by Becquerel and further work by the Curies), much has been learnt and understood in the interim period. The field of radionuclide metrology that developed subsequently is broad-based and encompasses, amongst others, nuclear physics (experimental and theory), chemistry, mathematics, mathematical statistics, uncertainty analysis and advanced computing for data analysis, simulation and modelling. To determine the activity of radionuclides accurately requires elements of all of these subjects. In more recent decades the focus has been on the practical applications of radioactivity in industry and the health field in particular. In addition, low-level environmental radioactivity monitoring has taken on ever greater importance in the nuclear power era. These developments have required new detection instrumentation and techniques on an ongoing basis to ensure the improvement in accuracy and precision of measurement as demanded by the stringent requirements of the user community, such as the correct calibration of nuclear instrumentation. This leads into the need for traceability to national measurement standards maintained by the national metrology institutes. As part of the radioactivity traceability chain, as for all areas of metrology, it is vital that systems are in place to ensure that national standards can be checked for worldwide uniformity and measurement equivalence. Many of the resulting areas are covered by the topics in this special issue, although specifically excluded from the scope of the publication are topics that are widely covered in other publications due to their application in applied metrology—for example, radiochemistry, environmental gamma spectrometry and alpha spectrometry. There are three sections to this issue, starting with papers on how the CIPM Mutual Recognition Arrangement has been implemented for radionuclide metrology, following into the bulk of the publication with articles on the `state of the art' in radionuclide metrology and ending with traceability to national/international standards in nuclear medicine, environmental monitoring, radiation protection and decommissioning. This special issue in essence follows on from earlier BIPM Monographies that were published in order to provide the base information for radionuclide metrology. In many respects they complement the special issue since much of their content is still valid today, particularly those published more recently as an aid to ensuring consistency of method and data. The BIPM Monographies are freely available to download from the BIPM website at http://www.bipm.org/en/publications/monographies-ri.html. The papers in the special issue draw on the experience of radionuclide metrologists who have been involved in their area of expertise for many years. The authors give readers an insightful account of the selected topics through in-depth review articles. We are indeed indebted to them for accepting this difficult and time-consuming task and also thank the many researchers recognized in the articles who have contributed to expanding the field over many years. The considerable effort put into this issue would not have been possible without input from the appointed referees, as well as the project team also comprising Yoshio Hino, Jose-Marie Los Arcos, Mike Unterweger and Brian Zimmerman. Thanks are also due to the Metrologia Editor, Jeffrey Williams, and the editorial staff for their sterling efforts in keeping the issue on track and the publication on schedule. Last, but not least, we thank Prof. Georgio Moscati, President of the CCRI, and Dr Penny Allisy-Roberts, Executive Secretary of the CCRI, for their continuous interest and support for the project.

Metrology for stable isotope reference materials: 13C/12C and 18O/16O isotope ratio value assignment of pure carbon dioxide gas samples on the Vienna PeeDee Belemnite-CO2 scale using dual-inlet mass spectrometry.

PubMed

Srivastava, Abneesh; Michael Verkouteren, R

2018-07-01

Isotope ratio measurements have been conducted on a series of isotopically distinct pure CO 2 gas samples using the technique of dual-inlet isotope ratio mass spectrometry (DI-IRMS). The influence of instrumental parameters, data normalization schemes on the metrological traceability and uncertainty of the sample isotope composition have been characterized. Traceability to the Vienna PeeDee Belemnite(VPDB)-CO 2 scale was realized using the pure CO 2 isotope reference materials(IRMs) 8562, 8563, and 8564. The uncertainty analyses include contributions associated with the values of iRMs and the repeatability and reproducibility of our measurements. Our DI-IRMS measurement system is demonstrated to have high long-term stability, approaching a precision of 0.001 parts-per-thousand for the 45/44 and 46/44 ion signal ratios. The single- and two-point normalization bias for the iRMs were found to be within their published standard uncertainty values. The values of 13 C/ 12 C and 18 O/ 16 O isotope ratios are expressed relative to VPDB-CO 2 using the [Formula: see text] and [Formula: see text] notation, respectively, in parts-per-thousand (‰ or per mil). For the samples, value assignments between (-25 to +2) ‰ and (-33 to -1) ‰ with nominal combined standard uncertainties of (0.05, 0.3) ‰ for [Formula: see text] and [Formula: see text], respectively were obtained. These samples are used as laboratory reference to provide anchor points for value assignment of isotope ratios (with VPDB traceability) to pure CO 2 samples. Additionally, they serve as potential parent isotopic source material required for the development of gravimetric based iRMs of CO 2 in CO 2 -free dry air in high pressure gas cylinder packages at desired abundance levels and isotopic composition values. Graphical abstract CO 2 gas isotope ratio metrology.

The SIM Time Network

PubMed Central

Lombardi, Michael A.; Novick, Andrew N.; Lopez R, J. Mauricio; Jimenez, Francisco; de Carlos Lopez, Eduardo; Boulanger, Jean-Simon; Pelletier, Raymond; de Carvalho, Ricardo J.; Solis, Raul; Sanchez, Harold; Quevedo, Carlos Andres; Pascoe, Gregory; Perez, Daniel; Bances, Eduardo; Trigo, Leonardo; Masi, Victor; Postigo, Henry; Questelles, Anthony; Gittens, Anselm

2011-01-01

The Sistema Interamericano de Metrologia (SIM) is a regional metrology organization (RMO) whose members are the national metrology institutes (NMIs) located in the 34 nations of the Organization of American States (OAS). The SIM/OAS region extends throughout North, Central, and South America and the Caribbean Islands. About half of the SIM NMIs maintain national standards of time and frequency and must participate in international comparisons in order to establish metrological traceability to the International System (SI) of units. The SIM time network (SIMTN) was developed as a practical, cost effective, and technically sound way to automate these comparisons. The SIMTN continuously compares the time standards of SIM NMIs and produces measurement results in near real-time by utilizing the Internet and the Global Positioning System (GPS). Fifteen SIM NMIs have joined the network as of December 2010. This paper provides a brief overview of SIM and a technical description of the SIMTN. It presents international comparison results and examines the measurement uncertainties. It also discusses the metrological benefits that the network provides to its participants. PMID:26989584

The SIM Time Network.

PubMed

Lombardi, Michael A; Novick, Andrew N; Lopez R, J Mauricio; Jimenez, Francisco; de Carlos Lopez, Eduardo; Boulanger, Jean-Simon; Pelletier, Raymond; de Carvalho, Ricardo J; Solis, Raul; Sanchez, Harold; Quevedo, Carlos Andres; Pascoe, Gregory; Perez, Daniel; Bances, Eduardo; Trigo, Leonardo; Masi, Victor; Postigo, Henry; Questelles, Anthony; Gittens, Anselm

2011-01-01

The Sistema Interamericano de Metrologia (SIM) is a regional metrology organization (RMO) whose members are the national metrology institutes (NMIs) located in the 34 nations of the Organization of American States (OAS). The SIM/OAS region extends throughout North, Central, and South America and the Caribbean Islands. About half of the SIM NMIs maintain national standards of time and frequency and must participate in international comparisons in order to establish metrological traceability to the International System (SI) of units. The SIM time network (SIMTN) was developed as a practical, cost effective, and technically sound way to automate these comparisons. The SIMTN continuously compares the time standards of SIM NMIs and produces measurement results in near real-time by utilizing the Internet and the Global Positioning System (GPS). Fifteen SIM NMIs have joined the network as of December 2010. This paper provides a brief overview of SIM and a technical description of the SIMTN. It presents international comparison results and examines the measurement uncertainties. It also discusses the metrological benefits that the network provides to its participants.

The European nanometrology landscape.

PubMed

Leach, Richard K; Boyd, Robert; Burke, Theresa; Danzebrink, Hans-Ulrich; Dirscherl, Kai; Dziomba, Thorsten; Gee, Mark; Koenders, Ludger; Morazzani, Valérie; Pidduck, Allan; Roy, Debdulal; Unger, Wolfgang E S; Yacoot, Andrew

2011-02-11

This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.

The European nanometrology landscape

NASA Astrophysics Data System (ADS)

Leach, Richard K.; Boyd, Robert; Burke, Theresa; Danzebrink, Hans-Ulrich; Dirscherl, Kai; Dziomba, Thorsten; Gee, Mark; Koenders, Ludger; Morazzani, Valérie; Pidduck, Allan; Roy, Debdulal; Unger, Wolfgang E. S.; Yacoot, Andrew

2011-02-01

This review paper summarizes the European nanometrology landscape from a technical perspective. Dimensional and chemical nanometrology are discussed first as they underpin many of the developments in other areas of nanometrology. Applications for the measurement of thin film parameters are followed by two of the most widely relevant families of functional properties: measurement of mechanical and electrical properties at the nanoscale. Nanostructured materials and surfaces, which are seen as key materials areas having specific metrology challenges, are covered next. The final section describes biological nanometrology, which is perhaps the most interdisciplinary applications area, and presents unique challenges. Within each area, a review is provided of current status, the capabilities and limitations of current techniques and instruments, and future directions being driven by emerging industrial measurement requirements. Issues of traceability, standardization, national and international programmes, regulation and skills development will be discussed in a future paper.

Sensitivity, accuracy, and precision issues in opto-electronic holography based on fiber optics and high-spatial- and high-digitial-resolution cameras

NASA Astrophysics Data System (ADS)

Furlong, Cosme; Yokum, Jeffrey S.; Pryputniewicz, Ryszard J.

2002-06-01

Sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography based on fiber optics and high-spatial and high-digital resolution cameras, are discussed in this paper. It is shown that sensitivity, accuracy, and precision dependent on both, the effective determination of optical phase and the effective characterization of the illumination-observation conditions. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gages, demonstrating the applicability of quantitative optical metrology techniques to satisfy constantly increasing needs for the study and development of emerging technologies.

Disseminating the unit of mass from multiple primary realisations

NASA Astrophysics Data System (ADS)

Nielsen, Lars

2016-12-01

When a new definition of the kilogram has been adopted in 2018 as expected, the unit of mass will be realised by the watt balance method, the x-ray crystal density method or perhaps other primary methods still to be developed. So far, the standard uncertainties associated with the available primary methods are at least one order of magnitude larger than the standard uncertainty associated with mass comparisons using mass comparators, so differences in primary realisations of the kilogram are easily detected, whereas many National Metrology Institutes would have to increase their calibration and measurement capabilities (CMCs) if they were traceable to a single primary realisation. This paper presents a scheme for obtaining traceability to multiple primary realisations of the kilogram using a small group of stainless steel 1 kg weights, which are allowed to change their masses over time in a way known to be realistic, and which are calibrated and stored in air. An analysis of the scheme shows that if the relative standard uncertainties of future primary realisations are equal to the relative standard uncertainties of the present methods used to measure the Planck constant, the unit of mass can be disseminated with a standard uncertainty less than 0.015 mg, which matches the smallest CMCs currently claimed for the calibration of 1 kg weights.

Towards traceable transient pressure metrology

NASA Astrophysics Data System (ADS)

Hanson, Edward; Olson, Douglas A.; Liu, Haijun; Ahmed, Zeeshan; Douglass, Kevin O.

2018-04-01

We describe our progress in developing the infrastructure for traceable transient measurements of pressure. Towards that end, we have built and characterized a dual diaphragm shock tube that allows us to achieve shock amplitude reproducibility of approximately 2.3% for shocks with Mach speeds ranging from 1.26-1.5. In this proof-of-concept study we use our shock tube to characterize the dynamic response of photonic sensors embedded in polydimethylsiloxane (PDMS), a material of choice for soft tissue phantoms. Our results indicate that the PDMS-embedded photonic sensors response to shock evolves over a tens to hundreds of microseconds time scale making it a useful system for studying transient pressures in soft tissue.

Maintenance of reference standards in the field of viscosity

NASA Astrophysics Data System (ADS)

Moşulică, E. A.; Cîrneanu, I.; Constantin, N.; Rucai, V.

2018-01-01

Participation in the work of comparison in the field of viscosity, within the program conducted under the jurisdiction of ASTM (American Society for Testing and Materials), D-2 Committee, Subcommittee "Flow Properties," Newtonian Fluids) was necessary to ensure traceability of measuring unit of kinematic viscosity. Results of the comparison of the specialized participating laboratories on 4 continents, has proved annual capability of INM in the transmission unit of kinematic viscosity. Cannon Position Company in the US organizes co-operation program in the field of kinematic viscosity ASTM D 02.07. The company distributes standard substances Cannon viscosity participating laboratories and consolidate the results of the measurements. Physical-chemical laboratory has fully accepted the proposed schedule of the company Cannon. Final report of the comparison showed that in the year 2015 a number of 25 laboratories and institutes of metrology attented to the program.

Maintaining and disseminating the kilogram following its redefinition

NASA Astrophysics Data System (ADS)

Stock, M.; Davidson, S.; Fang, H.; Milton, M.; de Mirandés, E.; Richard, P.; Sutton, C.

2017-12-01

The new definition of the kilogram, which is expected to be adopted by the General Conference on Weights and Measures in 2018, will bring some major changes to mass metrology. The most fundamental change will be the replacement of the present artefact-based definition with a universal definition, enabling in principle any National Metrology Institute (NMI) to realize the kilogram. The principles for the realization and dissemination of the kilogram in the revised SI are described in the mise en pratique of the definition of the kilogram. This paper provides some additional information and explains how traceability can be obtained by NMIs that do not operate a primary experiment to realize the definition of the kilogram.

Quantitative optical metrology with CMOS cameras

NASA Astrophysics Data System (ADS)

Furlong, Cosme; Kolenovic, Ervin; Ferguson, Curtis F.

2004-08-01

Recent advances in laser technology, optical sensing, and computer processing of data, have lead to the development of advanced quantitative optical metrology techniques for high accuracy measurements of absolute shapes and deformations of objects. These techniques provide noninvasive, remote, and full field of view information about the objects of interest. The information obtained relates to changes in shape and/or size of the objects, characterizes anomalies, and provides tools to enhance fabrication processes. Factors that influence selection and applicability of an optical technique include the required sensitivity, accuracy, and precision that are necessary for a particular application. In this paper, sensitivity, accuracy, and precision characteristics in quantitative optical metrology techniques, and specifically in optoelectronic holography (OEH) based on CMOS cameras, are discussed. Sensitivity, accuracy, and precision are investigated with the aid of National Institute of Standards and Technology (NIST) traceable gauges, demonstrating the applicability of CMOS cameras in quantitative optical metrology techniques. It is shown that the advanced nature of CMOS technology can be applied to challenging engineering applications, including the study of rapidly evolving phenomena occurring in MEMS and micromechatronics.

Precision and accuracy of decay constants and age standards

NASA Astrophysics Data System (ADS)

Villa, I. M.

2011-12-01

40 years of round-robin experiments with age standards teach us that systematic errors must be present in at least N-1 labs if participants provide N mutually incompatible data. In EarthTime, the U-Pb community has produced and distributed synthetic solutions with full metrological traceability. Collector linearity is routinely calibrated under variable conditions (e.g. [1]). Instrumental mass fractionation is measured in-run with double spikes (e.g. 233U-236U). Parent-daughter ratios are metrologically traceable, so the full uncertainty budget of a U-Pb age should coincide with interlaboratory uncertainty. TIMS round-robin experiments indeed show a decrease of N towards the ideal value of 1. Comparing 235U-207Pb with 238U-206Pb ages (e.g. [2]) has resulted in a credible re-evaluation of the 235U decay constant, with lower uncertainty than gamma counting. U-Pb microbeam techniques reveal the link petrology-microtextures-microchemistry-isotope record but do not achieve the low uncertainty of TIMS. In the K-Ar community, N is large; interlaboratory bias is > 10 times self-assessed uncertainty. Systematic errors may have analytical and petrological reasons. Metrological traceability is not yet implemented (substantial advance may come from work in progress, e.g. [7]). One of the worst problems is collector stability and linearity. Using electron multipliers (EM) instead of Faraday buckets (FB) reduces both dynamic range and collector linearity. Mass spectrometer backgrounds are never zero; the extent as well as the predictability of their variability must be propagated into the uncertainty evaluation. The high isotope ratio of the atmospheric Ar requires a large dynamic range over which linearity must be demonstrated under all analytical conditions to correctly estimate mass fractionation. The only assessment of EM linearity in Ar analyses [3] points out many fundamental problems; the onus of proof is on every laboratory claiming low uncertainties. Finally, sample size reduction is often associated to reducing clean-up time to increase sample/blank ratio; this may be self-defeating, as "dry blanks" [4] do not represent either the isotopic composition or the amount of Ar released by the sample chamber when exposed to unpurified sample gas. Single grains enhance background and purification problems relative to large sample sizes measured on FB. Petrologically, many natural "standards" are not ideal (e.g. MMhb1 [5], B4M [6]), as their original distributors never conceived petrology as the decisive control on isotope retention. Comparing ever smaller aliquots of unequilibrated minerals causes ever larger age variations. Metrologically traceable synthetic isotope mixtures still lie in the future. Petrological non-ideality of natural standards does not allow a metrological uncertainty budget. Collector behavior, on the contrary, does. Its quantification will, by definition, make true intralaboratory uncertainty greater or equal to interlaboratory bias. [1] Chen J, Wasserburg GJ, 1981. Analyt Chem 53, 2060-2067 [2] Mattinson JM, 2010. Chem Geol 275, 186-198 [3] Turrin B et al, 2010. G-cubed, 11, Q0AA09 [4] Baur H, 1975. PhD thesis, ETH Zürich, No. 6596 [5] Villa IM et al, 1996. Contrib Mineral Petrol 126, 67-80 [6] Villa IM, Heri AR, 2010. AGU abstract V31A-2296 [7] Morgan LE et al, in press. G-cubed, 2011GC003719

Iron Disilicide as High-Temperature Reference Material for Traceable Measurements of Seebeck Coefficient Between 300 K and 800 K

NASA Astrophysics Data System (ADS)

Ziolkowski, Pawel; Stiewe, Christian; de Boor, Johannes; Druschke, Ines; Zabrocki, Knud; Edler, Frank; Haupt, Sebastian; König, Jan; Mueller, Eckhard

2017-01-01

Thermoelectric generators (TEGs) convert heat to electrical energy by means of the Seebeck effect. The Seebeck coefficient is a central thermoelectric material property, measuring the magnitude of the thermovoltage generated in response to a temperature difference across a thermoelectric material. Precise determination of the Seebeck coefficient provides the basis for reliable performance assessment in materials development in the field of thermoelectrics. For several reasons, measurement uncertainties of up to 14% can often be observed in interlaboratory comparisons of temperature-dependent Seebeck coefficient or in error analyses on currently employed instruments. This is still too high for an industrial benchmark and insufficient for many scientific investigations and technological developments. The TESt (thermoelectric standardization) project was launched in 2011, funded by the German Federal Ministry of Education and Research (BMBF), to reduce measurement uncertainties, engineer traceable and precise thermoelectric measurement techniques for materials and TEGs, and develop reference materials (RMs) for temperature-dependent determination of the Seebeck coefficient. We report herein the successful development and qualification of cobalt-doped β-iron disilicide ( β-Fe0.95Co0.05Si2) as a RM for high-temperature thermoelectric metrology. A brief survey on technological processes for manufacturing and machining of samples is presented. Focus is placed on metrological qualification of the iron disilicide, results of an international round-robin test, and final certification as a reference material in accordance with ISO-Guide 35 and the "Guide to the expression of uncertainty in measurement" by the Physikalisch-Technische Bundesanstalt, the national metrology institute of Germany.

MSFC Optical Metrology: A National Resource

NASA Technical Reports Server (NTRS)

Burdine, Robert

1998-01-01

A national need exists for Large Diameter Optical Metrology Services. These services include the manufacture, testing, and assurance of precision and control necessary to assure the success of large optical projects. "Best Practices" are often relied on for manufacture and quality controls while optical projects are increasingly more demanding and complex. Marshall Space Flight Center (MSFC) has acquired unique optical measurement, testing and metrology capabilities through active participation in a wide variety of NASA optical programs. An overview of existing optical facilities and metrology capabilities is given with emphasis on use by other optical projects. Cost avoidance and project success is stressed through use of existing MSFC facilities and capabilities for measurement and metrology controls. Current issues in large diameter optical metrology are briefly reviewed. The need for a consistent and long duration Large Diameter Optical Metrology Service Group is presented with emphasis on the establishment of a National Large Diameter Optical Standards Laboratory. Proposals are made to develop MSFC optical standards and metrology capabilities as the primary national standards resource, providing access to MSFC Optical Core Competencies for manufacturers and researchers. Plans are presented for the development of a national lending library of precision optical standards with emphasis on cost avoidance while improving measurement assurance.

Applied metrology in the production of superconducting model magnets for particle accelerators

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ferradas Troitino, Jose; Bestmann, Patrick; Bourcey, Nicolas

2017-12-22

The production of superconducting magnets for particle accelerators involves high precision assemblies and tight tolerances, in order to achieve the requirements for their appropriate performance. It is therefore essential to have a strict control and traceability over the geometry of each component of the system, and also to be able to compensate possible inherent deviations coming from the production process.

Field campaigns of the autonomous, closed-path, airborne TDLAS Hygrometer SEALDH-II and traceability to the German Primary Humidity Standards.

NASA Astrophysics Data System (ADS)

Buchholz, Bernhard; Ebert, Volker

2014-05-01

Airborne hygrometry is often demanded in scientific flight campaigns to provide datasets for environmental modeling or to correct for water vapor dilution or cross sensitivity effects in other gas analytical techniques. Water vapor measurements, however, are quite challenging due to the large dynamic range in the atmosphere (between 2 and 40000 ppmv) and the high spatio-temporal variability. Airborne hygrometers therefore need to combine a large measurement range with high temporal resolution to resolve - at typical airspeeds of 500 to 900 km/h - atmospheric gradients of several 1000 ppmv/s. Especially during the ascent into the upper troposphere, hygrometers need to work at high gas exchange rates to minimize water vapor adsorption effects. On the other hand, water vapor sensors are difficult to calibrate due to the strong water adsorption and the lack of bottled reference gas standards, which requires pre- or/and post-flight field calibrations. Recently in-flight calibration using an airborne H2O generator was demonstrated, which minimizes calibration drift but still imposes a lot of additional work and hardware to the experiments, since these kind of calibrations just transfer the accuracy level issues to the in-flight calibration-source. To make things worse, the low gas flow (1-5 std l/min, compared with up to 100 std l/min in flight for fast response instruments) adheres critical questions of wall absorption/desorption of the source and instrument even during the calibration process. The national metrological institutes (NMIs) maintain a global metrological water vapor scale which is defined via national primary humidity generators. These provide for calibration purposes well-defined, accurate water vapor samples of excellent comparability and stability traced back to the SI-units. The humidity calibration chain is maintained via high accuracy (but rather slow) Dew-Point-Mirror-Hygrometers as transfer standards. These provide a traceable performance and calibration link to any industrial or research laboratory hygrometer. To establish metrological traceability in field and particular in airborne hygrometers is however challenging and requires fast, field-compatible, metrologically qualified transfer hygrometry standards to link the metrological and the environmental sciences water scales. The SEALDH (Selective Extractive Airborne Laser Diode Hygrometer) development started 3 years ago and aims at filling this gap by using Tunable Diode Laser Absorption Spectroscopy (TDLAS) with a special, calibration-free data evaluation [1]. Previously developed, laboratory-based TDLAS instruments, such as [2] [3], were starting points to develop an autonomously operating, extractive water vapor sensor in a compact 19' 4 HU form factor. This new airborne package and far-reaching developments [4] in hard- and software allow an autonomous, low maintenance, airborne operation. SEALDH-II can be used in a calibration-free field sensor mode (with an absolute, metrologically defined uncertainty of 4.3% +- 3ppmv). The response time is mainly limited by the gas flow and significantly below 1 sec with a precision down to 0.08 ppmv (1σ, 1sec) measured at 600 ppmv and 1000 hPa. The excellent long-term stability of SEALDH-II (

Absolute sulfur isotope amount ratios in two batches of high purity SO2 gas: sulfur isotope reference materials IRMM-2012 and IRMM-2013

NASA Astrophysics Data System (ADS)

Valkiers, S.; Ding, T.; Ruße, K.; de Bièvre, P.; Taylor, P. D. P.

2005-04-01

SI-traceable ("absolute") values have been obtained for sulfur isotope amount ratios n(33S)/n(32S) and n(34S)/n(32S), in two batches of high purity SO2 gas (IRMM-2012 and IRMM-2013). The SO2 gas was converted at IMR-Beijing to Ag2S, then fluorinated to SF6 gas both at IMR-Beijing and at IRMM-Geel. Yields of different conversion methods exceeded 99%. The sulfur amount-of-substance measurements were performed by gas mass spectrometry on SF5+ ions using "IRMM's amount comparator II". These isotope amount ratios were calibrated by means of gravimetrically prepared synthetic mixtures of highly enriched sulfur isotopes (32S, 33S and 34S) in Ag2S form. The ratio values in the SO2 Secondary Measurement Standard are traceable to the SI system. They can be used in the calibration of field sulfur isotope measurements thus making these metrologically traceable to the SI.

Absolute, pressure-dependent validation of a calibration-free, airborne laser hygrometer transfer standard (SEALDH-II) from 5 to 1200 ppmv using a metrological humidity generator

NASA Astrophysics Data System (ADS)

Buchholz, Bernhard; Ebert, Volker

2018-01-01

Highly accurate water vapor measurements are indispensable for understanding a variety of scientific questions as well as industrial processes. While in metrology water vapor concentrations can be defined, generated, and measured with relative uncertainties in the single percentage range, field-deployable airborne instruments deviate even under quasistatic laboratory conditions up to 10-20 %. The novel SEALDH-II hygrometer, a calibration-free, tuneable diode laser spectrometer, bridges this gap by implementing a new holistic concept to achieve higher accuracy levels in the field. We present in this paper the absolute validation of SEALDH-II at a traceable humidity generator during 23 days of permanent operation at 15 different H2O mole fraction levels between 5 and 1200 ppmv. At each mole fraction level, we studied the pressure dependence at six different gas pressures between 65 and 950 hPa. Further, we describe the setup for this metrological validation, the challenges to overcome when assessing water vapor measurements on a high accuracy level, and the comparison results. With this validation, SEALDH-II is the first airborne, metrologically validated humidity transfer standard which links several scientific airborne and laboratory measurement campaigns to the international metrological water vapor scale.

Fluid-flow-rate metrology: laboratory uncertainties and traceabilities

NASA Astrophysics Data System (ADS)

Mattingly, G. E.

1991-03-01

Increased concerns for improved fluid flowrate measurement are driving the fluid metering community-meter manufacturers and users alike-to search for better verification and documentation for their fluid measurements. These concerns affect both our domestic and international market places they permeate our technologies - aerospace chemical processes automotive bioengineering etc. They involve public health and safety and they impact our national defense. These concerns are based upon the rising value of fluid resources and products and the importance of critical material accountability. These values directly impact the accuracy needs of fluid buyers and sellers in custody transfers. These concerns impact the designers and operators of chemical process systems where control and productivity optimization depend critically upon measurement precision. Public health and safety depend upon the quality of numerous pollutant measurements - both liquid and gaseous. The performance testing of engines - both automotive and aircraft are critically based upon accurate fuel measurements - both liquid and oxidizer streams. Fluid flowrate measurements are established differently from counterparts in length and mass measurement systems because these have the benefits of " identity" standards. For rate measurement systems the metrology is based upon " derived standards" . These use facilities and transfer standards which are designed built characterized and used to constitute basic measurement capabilities and quantify performance - accuracy and precision. Because " identity standards" do not exist for flow measurements facsimiles or equivalents must

Current state of the art in small mass and force metrology within the International System of Units

NASA Astrophysics Data System (ADS)

Shaw, Gordon A.

2018-07-01

This review article summarizes new scientific trends in research for metrology of small mass (1 mg and lower) and small force (10 micronewtons and lower). After a brief introduction to the field, this paper provides an overview of recent developments in methods that demonstrate traceability to the International System of Units (SI) with emphasis on the implications of redefining the kilogram in terms of Planck’s constant. Specific research applications include new metrology facilities, calibration of small mass and force references such as milligram to submilligram masses or atomic force microscope (AFM) cantilevers, and laser power measurement using radiation pressure forces. Also discussed are recent scientific developments that may impact the field moving forward in the study of ultrasmall forces present in trapped and cooled quantum mechanical systems, resonant micro- and nanomechanical mass sensors, and other areas that are potentially well suited for SI metrology. The work reviewed is not intended as a comprehensive review of all research in which small forces are measured, but rather as an overview of a field in which the accurate measurement of small mass and force with quantified uncertainty is the primary goal.

[The EFS metrology: From the production to the reason].

PubMed

Reifenberg, J-M; Riout, E; Leroy, A; Begue, S

2014-06-01

In order to answer statutory requirements and to anticipate the future needs and standards, the EFS is committed, since a few years, in a process of harmonization of its metrology function. In particular, the institution has opted for the skills development by internalizing the metrological traceability of the main critical quantities (temperature, volumetric) measurements. The development of metrology so resulted in a significant increase in calibration and testing activities. Methods are homogenized and improved through accreditations. The investment strategies are based on more and more demanding specifications. The performance of the equipments is better known and mastered. Technical expertise and maturity of the national metrology function today are assets to review in more informed ways the appropriateness of the applied periodicities. Analysis of numerous information and data in the calibration and testing reports could be pooled and operated on behalf of the unique establishment. The objective of this article is to illustrate these reflections with a few examples from of a feedback of the EFS Pyrénées Méditerranée. The analysis of some methods of qualification, the exploitation of the historical metrology in order to quantify the risk of non-compliance, and to adapt the control strategy, analysis of the criticality of an instrument in a measurement process, risk analyses are tools that deserve to be more widely exploited for that discipline wins in efficiency at the national level. Copyright © 2014 Elsevier Masson SAS. All rights reserved.

Gravimetric preparation and characterization of primary reference solutions of molybdenum and rhodium.

PubMed

Kaltenbach, Angela; Noordmann, Janine; Görlitz, Volker; Pape, Carola; Richter, Silke; Kipphardt, Heinrich; Kopp, Gernot; Jährling, Reinhard; Rienitz, Olaf; Güttler, Bernd

2015-04-01

Gravimetrically prepared mono-elemental reference solutions having a well-known mass fraction of approximately 1 g/kg (or a mass concentration of 1 g/L) define the very basis of virtually all measurements in inorganic analysis. Serving as the starting materials of all standard/calibration solutions, they link virtually all measurements of inorganic analytes (regardless of the method applied) to the purity of the solid materials (high-purity metals or salts) they were prepared from. In case these solid materials are characterized comprehensively with respect to their purity, this link also establishes direct metrological traceability to The International System of Units (SI). This, in turn, ensures the comparability of all results on the highest level achievable. Several national metrology institutes (NMIs) and designated institutes (DIs) have been working for nearly two decades in close cooperation with commercial producers on making an increasing number of traceable reference solutions available. Besides the comprehensive characterization of the solid starting materials, dissolving them both loss-free and completely under strict gravimetric control is a challenging problem in the case of several elements like molybdenum and rhodium. Within the framework of the European Metrology Research Programme (EMRP), in the Joint Research Project (JRP) called SIB09 Primary standards for challenging elements, reference solutions of molybdenum and rhodium were prepared directly from the respective metals with a relative expanded uncertainty associated with the mass fraction of U rel(w) < 0.05 %. To achieve this, a microwave-assisted digestion procedure for Rh and a hotplate digestion procedure for Mo were developed along with highly accurate and precise inductively coupled plasma optical emission spectrometry (ICP OES) and multicollector inductively coupled plasma mass spectrometry (MC-ICP-MS) methods required to assist with the preparation and as dissemination tools.

Metrology for hydrogen energy applications: a project to address normative requirements

NASA Astrophysics Data System (ADS)

Haloua, Frédérique; Bacquart, Thomas; Arrhenius, Karine; Delobelle, Benoît; Ent, Hugo

2018-03-01

Hydrogen represents a clean and storable energy solution that could meet worldwide energy demands and reduce greenhouse gases emission. The joint research project (JRP) ‘Metrology for sustainable hydrogen energy applications’ addresses standardisation needs through pre- and co-normative metrology research in the fast emerging sector of hydrogen fuel that meet the requirements of the European Directive 2014/94/EU by supplementing the revision of two ISO standards that are currently too generic to enable a sustainable implementation of hydrogen. The hydrogen purity dispensed at refueling points should comply with the technical specifications of ISO 14687-2 for fuel cell electric vehicles. The rapid progress of fuel cell technology now requires revising this standard towards less constraining limits for the 13 gaseous impurities. In parallel, optimized validated analytical methods are proposed to reduce the number of analyses. The study aims also at developing and validating traceable methods to assess accurately the hydrogen mass absorbed and stored in metal hydride tanks; this is a research axis for the revision of the ISO 16111 standard to develop this safe storage technique for hydrogen. The probability of hydrogen impurity presence affecting fuel cells and analytical techniques for traceable measurements of hydrogen impurities will be assessed and new data of maximum concentrations of impurities based on degradation studies will be proposed. Novel validated methods for measuring the hydrogen mass absorbed in hydrides tanks AB, AB2 and AB5 types referenced to ISO 16111 will be determined, as the methods currently available do not provide accurate results. The outputs here will have a direct impact on the standardisation works for ISO 16111 and ISO 14687-2 revisions in the relevant working groups of ISO/TC 197 ‘Hydrogen technologies’.

Traceability validation of a high speed short-pulse testing method used in LED production

NASA Astrophysics Data System (ADS)

Revtova, Elena; Vuelban, Edgar Moreno; Zhao, Dongsheng; Brenkman, Jacques; Ulden, Henk

2017-12-01

Industrial processes of LED (light-emitting diode) production include LED light output performance testing. Most of them are monitored and controlled by optically, electrically and thermally measuring LEDs by high speed short-pulse measurement methods. However, these are not standardized and a lot of information is proprietary that it is impossible for third parties, such as NMIs, to trace and validate. It is known, that these techniques have traceability issue and metrological inadequacies. Often due to these, the claimed performance specifications of LEDs are overstated, which consequently results to manufacturers experiencing customers' dissatisfaction and a large percentage of failures in daily use of LEDs. In this research a traceable setup is developed to validate one of the high speed testing techniques, investigate inadequacies and work out the traceability issues. A well-characterised short square pulse of 25 ms is applied to chip-on-board (CoB) LED modules to investigate the light output and colour content. We conclude that the short-pulse method is very efficient in case a well-defined electrical current pulse is applied and the stabilization time of the device is "a priori" accurately determined. No colour shift is observed. The largest contributors to the measurement uncertainty include badly-defined current pulse and inaccurate calibration factor.

Traceable calibration and demonstration of a portable dynamic force transfer standard

NASA Astrophysics Data System (ADS)

Vlajic, Nicholas; Chijioke, Ako

2017-08-01

In general, the dynamic sensitivity of a force transducer depends upon the mechanical system in which it is used. This dependence serves as motivation to develop a dynamic force transfer standard, which can be used to calibrate an application transducer in situ. In this work, we SI-traceably calibrate a hand-held force transducer, namely an impact hammer, by using a mass suspended from a thin line which is cut to produce a known dynamic force in the form of a step function. We show that this instrument is a promising candidate as a transfer standard, since its dynamic response has small variance between different users. This calibrated transfer standard is then used to calibrate a secondary force transducer in an example application setting. The combined standard uncertainty (k  =  2) in the calibration of the transfer standard was determined to be 2.1% or less, up to a bandwidth of 5 kHz. The combined standard uncertainty (k  =  2) in the performed transfer calibration was less than 4%, up to 3 kHz. An advantage of the transfer calibration framework presented here, is that the transfer standard can be used to transfer SI-traceable calibrations without the use of any SI-traceable voltage metrology instrumentation.

Assessment of the present NASA optical metrology capabilities and recommendations for establishing an in-house NASA Optical Metrology Group

NASA Technical Reports Server (NTRS)

Parks, Robert E.

1991-01-01

An investigation into when it was first recognized that there was a deficiency in NASA optical metrology oversight capability, why this deficiency existed unnoticed for so long, and a proposal for correcting the problem is presented. It is explained why this optical metrology oversight is so critical to program success and at the same time, why it is difficult to establish due to the nature of the technology. The solution proposed is the establishment of an Optics Metrology Group within the NASA/MSFC Optics Branch with a line of authority from NASA S & MA.

New NIST Photomask Linewidth Standard

NASA Astrophysics Data System (ADS)

Potzick, James E.; Pedulla, J. Marc; Stocker, Michael T.

2002-12-01

NIST is preparing to issue the next generation in its line of binary photomask linewidth standards. Called SRM 2059, it was developed for calibrating microscopes used to measure linewidths on photomasks, and consists of antireflecting chrome line and space patterns on a 6 inch quartz substrate ( 6 × 6 × 0.25 inches, or 15.2 × 15.2 × 0.635 cm). Certified line- and space-widths range from nominal 0.250 μm to 32 μm, and pitches from 0.5 μm to 250 μm, and are traceable to the definition of the meter. NIST's reference value, the definition of the meter, is well defined and unconditionally stable. Any replacement or duplicate NIST linewidth standard will be traceable to this same reference, and thus traceable to any other NIST length standard. Such measurement traceability can be achieved only by evaluating the measurement uncertainty (not just the repeatability) of each length comparison in the metrology chain between the definition of the meter and the NIST linewidth standard. This process results in a confidence interval about the calibration result that has a 95% probability of containing the true value. While the meter (and the μm) are well-defined, the geometrical width of a chrome line with nonrectangular cross section is not, and so the "true value" linewidth must be carefully defined to best meet users' needs. The paper and presentation will describe how these mask features are measured at NIST and how their measurement traceability is accomplished.

Force Measurement Services at Kebs: AN Overview of Equipment, Procedures and Uncertainty

NASA Astrophysics Data System (ADS)

Bangi, J. O.; Maranga, S. M.; Nganga, S. P.; Mutuli, S. M.

This paper describes the facilities, instrumentation and procedures currently used in the force laboratory at the Kenya Bureau of Standards (KEBS) for force measurement services. The laboratory uses the Force Calibration Machine (FCM) to calibrate force-measuring instruments. The FCM derives its traceability via comparisons using reference transfer force transducers calibrated by the Force Standard Machines (FSM) of a National Metrology Institute (NMI). The force laboratory is accredited to ISO/IEC 17025 by the Germany Accreditation Body (DAkkS). The accredited measurement scope of the laboratory is 1 MN to calibrate force transducers in both compression and tension modes. ISO 376 procedures are used while calibrating force transducers. The KEBS reference transfer standards have capacities of 10, 50, 300 and 1000 kN to cover the full range of the FCM. The uncertainty in the forces measured by the FCM were reviewed and determined in accordance to the new EURAMET calibration guide. The relative expanded uncertainty of force W realized by FCM was evaluated in a range from 10 kN-1 MN, and was found to be 5.0 × 10-4 with the coverage factor k being equal to 2. The overall normalized error (En) of the comparison results was also found to be less than 1. The accredited Calibration and Measurement Capability (CMC) of the KEBS force laboratory was based on the results of those intercomparisons. The FCM enables KEBS to provide traceability for the calibration of class ‘1’ force instruments as per the ISO 376.

Dimensional nanometrology at the National Physical Laboratory

NASA Astrophysics Data System (ADS)

Yacoot, Andrew; Leach, Richard; Hughes, Ben; Giusca, Claudiu; Jones, Christopher; Wilson, Alan

2008-10-01

The growth in nanotechnology has led to an increased requirement for traceable dimensional measurements of nanometre-sized objects and micrometre-sized objects with nanometre tolerances. To meet this challenge NPL has developed both purpose built instrumentation and added metrology to commercially available equipment. This paper describes the development and use of a selection of these instruments that include: atomic force microscopy, x-ray interferometry, a low force balance, a micro coordinate measuring machine and an areal surface texture measuring instrument.

The MeteoMet2 project—highlights and results

NASA Astrophysics Data System (ADS)

Merlone, A.; Sanna, F.; Beges, G.; Bell, S.; Beltramino, G.; Bojkovski, J.; Brunet, M.; del Campo, D.; Castrillo, A.; Chiodo, N.; Colli, M.; Coppa, G.; Cuccaro, R.; Dobre, M.; Drnovsek, J.; Ebert, V.; Fernicola, V.; Garcia-Benadí, A.; Garcia-Izquierdo, C.; Gardiner, T.; Georgin, E.; Gonzalez, A.; Groselj, D.; Heinonen, M.; Hernandez, S.; Högström, R.; Hudoklin, D.; Kalemci, M.; Kowal, A.; Lanza, L.; Miao, P.; Musacchio, C.; Nielsen, J.; Nogueras-Cervera, M.; Oguz Aytekin, S.; Pavlasek, P.; de Podesta, M.; Rasmussen, M. K.; del-Río-Fernández, J.; Rosso, L.; Sairanen, H.; Salminen, J.; Sestan, D.; Šindelářová, L.; Smorgon, D.; Sparasci, F.; Strnad, R.; Underwood, R.; Uytun, A.; Voldan, M.

2018-02-01

Launched in 2011 within the European Metrology Research Programme (EMRP) of EURAMET, the joint research project ‘MeteoMet’—Metrology for Meteorology—is the largest EMRP consortium; national metrology institutes, universities, meteorological and climate agencies, research institutes, collaborators and manufacturers are working together, developing new metrological techniques, as well as improving existing ones, for use in meteorological observations and climate records. The project focuses on humidity in the upper and surface atmosphere, air temperature, surface and deep-sea temperatures, soil moisture, salinity, permafrost temperature, precipitation, and the snow albedo effect on air temperature. All tasks are performed using a rigorous metrological approach and include the design and study of new sensors, new calibration facilities, the investigation of sensor characteristics, improved techniques for measurements of essential climate variables with uncertainty evaluation, traceability, laboratory proficiency and the inclusion of field influencing parameters, long-lasting measurements, and campaigns in remote and extreme areas. The vision for MeteoMet is to take a step further towards establishing full data comparability, coherency, consistency, and long-term continuity, through a comprehensive evaluation of the measurement uncertainties for the quantities involved in the global climate observing systems and the derived observations. The improvement in quality of essential climate variables records, through the inclusion of measurement uncertainty budgets, will also highlight possible strategies for the reduction of the uncertainty. This contribution presents selected highlights of the MeteoMet project and reviews the main ongoing activities, tasks and deliverables, with a view to its possible future evolution and extended impact.

Ultraviolet Radiation Dose National Standard of México

NASA Astrophysics Data System (ADS)

Cardoso, R.; Rosas, E.

2006-09-01

We present the Ultraviolet (UV) Radiation Dose National Standard for México. The establishment of this measurement reference at Centro Nacional de Metrología (CENAM) eliminates the need of contacting foreign suppliers in the search for traceability towards the SI units when calibrating instruments at 365 nm. Further more, the UV Radiation Dose National Standard constitutes a highly accurate and reliable source for the UV radiation dose measurements performed in medical and cosmetic treatments as in the the food and pharmaceutics disinfection processes, among other.

Evaluation of 3D metrology potential using a multiple detector CDSEM

NASA Astrophysics Data System (ADS)

Hakii, Hidemitsu; Yonekura, Isao; Nishiyama, Yasushi; Tanaka, Keishi; Komoto, Kenji; Murakawa, Tsutomu; Hiroyama, Mitsuo; Shida, Soichi; Kuribara, Masayuki; Iwai, Toshimichi; Matsumoto, Jun; Nakamura, Takayuki

2012-06-01

As feature sizes of semiconductor device structures have continuously decreased, needs for metrology tools with high precision and excellent linearity over actual pattern sizes have been growing. And it has become important to measure not only two-dimensional (2D) but also three-dimensional (3D) shapes of patterns at 22 nm node and beyond. To meet requirements for 3D metrology capabilities, various pattern metrology tools have been developed. Among those, we assume that CDSEM metrology is the most qualified candidate in the light of its non-destructive, high throughput measurement capabilities that are expected to be extended to the much-awaited 3D metrology technology. On the basis of this supposition, we have developed the 3D metrology system, in which side wall angles and heights of photomask patterns can be measured with high accuracy through analyzing CDSEM images generated by multi-channel detectors. In this paper, we will discuss our attempts to measure 3D shapes of defect patterns on a photomask by using Advantest's "Multi Vision Metrology SEM" E3630 (MVM-SEM' E3630).

Validation of Radiometric Standards for the Laboratory Calibration of Reflected-Solar Earth Observing Satellite Instruments

NASA Technical Reports Server (NTRS)

Butler, James J.; Johnson, B. Carol; Rice, Joseph P.; Brown, Steven W.; Barnes, Robert A.

2007-01-01

Historically, the traceability of the laboratory calibration of Earth-observing satellite instruments to a primary radiometric reference scale (SI units) is the responsibility of each instrument builder. For the NASA Earth Observing System (EOS), a program has been developed using laboratory transfer radiometers, each with its own traceability to the primary radiance scale of a national metrology laboratory, to independently validate the radiances assigned to the laboratory sources of the instrument builders. The EOS Project Science Office also developed a validation program for the measurement of onboard diffuse reflecting plaques, which are also used as radiometric standards for Earth-observing satellite instruments. Summarized results of these validation campaigns, with an emphasis on the current state-of-the-art uncertainties in laboratory radiometric standards, will be presented. Future mission uncertainty requirements, and possible enhancements to the EOS validation program to ensure that those uncertainties can be met, will be presented.

Traceable terahertz power measurement from 1 THz to 5 THz.

PubMed

Steiger, Andreas; Kehrt, Mathias; Monte, Christian; Müller, Ralf

2013-06-17

The metrology institute in Germany, the Physikalisch-Technische Bundesanstalt (PTB), calibrates the spectral responsivity of THz detectors at 2.52 THz traceable to International System of Units. The Terahertz detector calibration facility is equipped with a standard detector calibrated against a cryogenic radiometer at this frequency. In order to extend this service to a broader spectral range in the THz region a new standard detector was developed. This detector is based on a commercial thermopile detector. Its absorber was modified and characterized by spectroscopic methods with respect to its absorptance and reflectance from 1 THz to 5 THz and at the wavelength of a helium-neon laser in the visible spectral range. This offers the possibility of tracing back the THz power responsivity scale to the more accurate responsivity scale in the visible spectral range and thereby to reduce the uncertainty of detector calibrations in the THz range significantly.

Certification of reference materials for the determination of alkylphenols.

PubMed

Hanari, Nobuyasu; Ishikawa, Keiichiro; Shimizu, Yoshitaka; Otsuka, Satoko; Iwasawa, Ryoko; Fujiki, Naomi; Numata, Masahiko; Yarita, Takashi; Kato, Kenji

2015-04-01

Certified reference materials (CRMs) are playing an increasingly important role in national and international standardizing activities. In Japan, primary standard solutions for analyses of endocrine disrupters are supplied under the national standards dissemination system named the Japan Calibration Service System (JCSS). For the traceability on reference materials used for preparation of the primary standard solutions based on the JCSS, the National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST) has developed and certified high-purity reference materials of alkylphenols as NMIJ CRMs, such as 4-n-nonylphenol, 4-tert-octylphenol, 4-n-heptylphenol, 4-tert-butylphenol, and 2,4-dichlorophenol. Thereafter, it is essential to determine the alkylphenols by using these solutions based on the JCSS for environmental monitoring and risk assessments because analytical values obtained by using the solutions can ensure the reliability and traceability of the chemical analyses.

Certified Reference Material for Use in 1H, 31P, and 19F Quantitative NMR, Ensuring Traceability to the International System of Units.

PubMed

Rigger, Romana; Rück, Alexander; Hellriegel, Christine; Sauermoser, Robert; Morf, Fabienne; Breitruck, KathrinBreitruck; Obkircher, Markus

2017-09-01

In recent years, quantitative NMR (qNMR) spectroscopy has become one of the most important tools for content determination of organic substances and quantitative evaluation of impurities. Using Certified Reference Materials (CRMs) as internal or external standards, the extensively used qNMR method can be applied for purity determination, including unbroken traceability to the International System of Units (SI). The implementation of qNMR toward new application fields, e.g., metabolomics, environmental analysis, and physiological pathway studies, brings along more complex molecules and systems, thus making use of 1H qNMR challenging. A smart workaround is possible by the use of other NMR active nuclei, namely 31P and 19F. This article presents the development of three classes of qNMR CRMs based on different NMR active nuclei (1H, 31P, and 19F), and the corresponding approaches to establish traceability to the SI through primary CRMs from the National Institute of Standards and Technology and the National Metrology Institute of Japan. These TraceCERT® qNMR CRMs are produced under ISO/IEC 17025 and ISO Guide 34 using high-performance qNMR.

The quantity time relation in the ionizing radiations

NASA Astrophysics Data System (ADS)

Jordão, B. O.; Quaresma, D. S.; Peixoto, J. G. P.

2018-03-01

The metrology area has taken a step forward with regard to the uncertainty calculation. This mathematical tool used in laboratories is essential to ensure that the values resulting from a measurement are reliable. For this to be possible, all equipment used in a measurement process must be reliable and, above all, traceable to the international metrology system. We propose to present in this work: (i) the development and calibration of a microcontrolled time device with a resolution of 1x10-4 s, in order to characterize the time greatness and make it re-producible; (ii) the calibration of the quartz clock present in a computer present in the dosimetry laboratories; (iii) a more in-depth study of the influence of time quantity on calibrations of instruments used in the area of radiological protection, diagnostic radiology and radiotherapy, with measurements performed on the Kerma magnitude in air or its rate.

Comparison of infusion pumps calibration methods

NASA Astrophysics Data System (ADS)

Batista, Elsa; Godinho, Isabel; do Céu Ferreira, Maria; Furtado, Andreia; Lucas, Peter; Silva, Claudia

2017-12-01

Nowadays, several types of infusion pump are commonly used for drug delivery, such as syringe pumps and peristaltic pumps. These instruments present different measuring features and capacities according to their use and therapeutic application. In order to ensure the metrological traceability of these flow and volume measuring equipment, it is necessary to use suitable calibration methods and standards. Two different calibration methods can be used to determine the flow error of infusion pumps. One is the gravimetric method, considered as a primary method, commonly used by National Metrology Institutes. The other calibration method, a secondary method, relies on an infusion device analyser (IDA) and is typically used by hospital maintenance offices. The suitability of the IDA calibration method was assessed by testing several infusion instruments at different flow rates using the gravimetric method. In addition, a measurement comparison between Portuguese Accredited Laboratories and hospital maintenance offices was performed under the coordination of the Portuguese Institute for Quality, the National Metrology Institute. The obtained results were directly related to the used calibration method and are presented in this paper. This work has been developed in the framework of the EURAMET projects EMRP MeDD and EMPIR 15SIP03.

Advances in engineering nanometrology at the National Physical Laboratory

NASA Astrophysics Data System (ADS)

Leach, Richard K.; Claverley, James; Giusca, Claudiu; Jones, Christopher W.; Nimishakavi, Lakshmi; Sun, Wenjuan; Tedaldi, Matthew; Yacoot, Andrew

2012-07-01

The National Physical Laboratory, UK, has been active in the field of engineering nanometrology for a number of years. A summary of progress over the last five years is presented in this paper and the following research projects discussed in detail. (1) Development of an infrastructure for the calibration of instruments for measuring areal surface topography, along with the development of areal software measurement standards. This work comprises the use of the optical transfer function and a technique for the simultaneous measurement of topography and the phase change on reflection, allowing composite materials to be measured. (2) Development of a vibrating micro-CMM probe with isotropic probing reaction and the ability to operate in a non-contact mode. (3) A review of x-ray computed tomography and its use in dimensional metrology. (4) The further development of a metrology infrastructure for atomic force microscopy and the development of an instrument for the measurement of the effect of the probe-surface interaction. (5) Traceable measurement of displacement using optical and x-ray interferometry to picometre accuracy. (6) Development of an infrastructure for low-force metrology, including the development of appropriate transfer artefacts.

Recent progress in high pressure metrology in Europe

NASA Astrophysics Data System (ADS)

Sabuga, Wladimir; Pražák, Dominik; Rabault, Thierry

2014-08-01

Five European national metrology institutes in collaboration with a university, a research institute and five industrial companies are working on a joint research project within a framework of the European Metrology Research Programme aimed at development of 1.6 GPa primary and 1.5 GPa transfer pressure standards. Two primary pressure standards were realised as pressure-measuring multipliers, each consisting of a low pressure and a high pressure (HP) piston-cylinder assembly (PCA). A special design of the HP PCAs was developed in which a tungsten carbide cylinder is supported by two thermally shrunk steel sleeves and, additionally, by jacket pressure applied to the outside of the outer sleeve. Stress-strain finite element analysis (FEA) was performed to predict behaviour of the multipliers and a pressure generation system. With FEA, the pressure distortion coefficient was determined, taking into account irregularities of the piston-cylinder gap. Transfer pressure standards up to 1.5 GPa are developed on the basis of modern 1.5 GPa pressure transducers. This project shall solve a discrepancy between the growing needs of the industry demanding precise traceable calibrations of the high pressure transducers and the absence of adequate primary standards for pressures higher than 1 GPa in the European Union today.

Spectroscopic metrology for isotope composition measurements and transfer standards

NASA Astrophysics Data System (ADS)

Anyangwe Nwaboh, Javis; Balslev-Harder, David; Kääriäinen, Teemu; Richmond, Craig; Manninen, Albert; Mohn, Joachim; Kiseleva, Maria; Petersen, Jan C.; Werhahn, Olav; Ebert, Volker

2017-04-01

The World Meteorological Organization (WMO) has identified greenhouse gases such as CO2, CH4 and N2O as critical for global climate monitoring. Other molecules such as CO that has an indirect effect of enhancing global warming are also monitored. WMO has stated compatibility goals for atmospheric concentration and isotope ratio measurements of these gases, e.g. 0.1 ppm for CO2 concentration measurements in the northern hemisphere and 0.01 ‰ for δ13C-CO2. For measurements of the concentration of greenhouse gases, gas analysers are typically calibrated with static gas standards e.g. traceable to the WMO scale or to the International System of Units (SI) through a national metrology institute. However, concentrations of target components, e.g. CO, in static gas standards have been observed to drift, and typically the gas matrix as well as the isotopic composition of the target component does not always reflect field gas composition, leading to deviations of the analyser response, even after calibration. The deviations are dependent on the measurement technique. To address this issue, part of the HIGHGAS (Metrology for high-impact greenhouse gases) project [1] focused on the development of optical transfer standards (OTSs) for greenhouse gases, e.g. CO2 and CO, potentially complementing gas standards. Isotope ratio mass spectrometry (IRMS) [2] is currently used to provide state-of-the-art high precision (in the 0.01 ‰ range) measurements for the isotopic composition of greenhouse gases. However, there is a need for field-deployable techniques such as optical isotope ratio spectroscopy (OIRS) that can be combined with metrological measurement methods. Within the HIGHGAS project, OIRS methods and procedures based on e.g. cavity enhanced spectroscopy (CES) and tunable diode laser absorption spectroscopy (TDLAS), matched to metrological principles have been established for the measurement of 13C/12C and 18O/16O ratios in CO2, 15N/14N ratios in N2O, and 13C/12C and 2H/1H ratios in CH4. Here, based on HIGHGAS project results, we present OTSs for atmospheric CO2 and CO measurements. The results delivered by the OTSs are in excellent agreement with gravimetric values of metrological "primary" static gas standards. The repeatabilities of the OTS results are matching the compatibility goals stated by WMO for atmospheric CO2 and CO measurements. In addition, we present OIRS measurement methods and procedures to demonstrate their applicability and validation. The requirements on, e.g. absorption line data quality and temperature sensitivity of isotope ratio, are discussed. Uncertainty budgets are presented and the traceability of the results is addressed. The current limitations in our measurements are discussed and steps taken to address these limitations are presented. Acknowledgement Parts of this work have been carried out within the European Metrology Research Programme (EMRP) ENV52 project-HIGHGAS. The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. References [1] EMRP project ENV52-HIGHGAS, available at: http://www.euramet.org/ [2] Prosenjit Ghosh, Willi A. Brand, International Journal of Mass Spectrometry 228, 1-33 (2003).

Metrology for the manufacturing of freeform optics

NASA Astrophysics Data System (ADS)

Blalock, Todd; Myer, Brian; Ferralli, Ian; Brunelle, Matt; Lynch, Tim

2017-10-01

Recently the use of freeform surfaces have become a realization for optical designers. These non-symmetrical optical surfaces have allowed unique solutions to optical design problems. The implementation of freeform optical surfaces has been limited by manufacturing capabilities and quality. However over the past several years freeform fabrication processes have improved in capability and precision. But as with any manufacturing, proper metrology is required to monitor and verify the process. Typical optics metrology such as interferometry has its challenges and limitations with the unique shapes of freeform optics. Two contact metrology methods for freeform metrology are presented; a Leitz coordinate measurement machine (CMM) with an uncertainty of +/- 0.5 μm and a high resolution profilometer (Panasonic UA3P) with a measurement uncertainty of +/- 0.05 μm. We are also developing a non-contact high resolution technique based on the fringe reflection technique known as deflectometry. This fast non-contact metrology has the potential to compete with accuracies of the contact methods but also can acquire data in seconds rather than minutes or hours.

Application of the Reference Method Isotope Dilution Gas Chromatography Mass Spectrometry (ID/GC/MS) to Establish Metrological Traceability for Calibration and Control of Blood Glucose Test Systems

PubMed Central

Andreis, Elisabeth; Küllmer, Kai

2014-01-01

Self-monitoring of blood glucose (BG) by means of handheld BG systems is a cornerstone in diabetes therapy. The aim of this article is to describe a procedure with proven traceability for calibration and evaluation of BG systems to guarantee reliable BG measurements. Isotope dilution gas chromatography mass spectrometry (ID/GC/MS) is a method that fulfills all requirements to be used in a higher-order reference measurement procedure. However, this method is not applicable for routine measurements because of the time-consuming sample preparation. A hexokinase method with perchloric acid (PCA) sample pretreatment is used in a measurement procedure for such purposes. This method is directly linked to the ID/GC/MS method by calibration with a glucose solution that has an ID/GC/MS-determined target value. BG systems are calibrated with whole blood samples. The glucose levels in such samples are analyzed by this ID/GC/MS-linked hexokinase method to establish traceability to higher-order reference material. For method comparison, the glucose concentrations in 577 whole blood samples were measured using the PCA-hexokinase method and the ID/GC/MS method; this resulted in a mean deviation of 0.1%. The mean deviation between BG levels measured in >500 valid whole blood samples with BG systems and the ID/GC/MS was 1.1%. BG systems allow a reliable glucose measurement if a true reference measurement procedure, with a noninterrupted traceability chain using ID/GC/MS linked hexokinase method for calibration of BG systems, is implemented. Systems should be calibrated by means of a traceable and defined measurement procedure to avoid bias. PMID:24876614

Computational metrology: enabling full-lot high-density fingerprint information without adding wafer metrology budget, and driving improved monitoring and process control

NASA Astrophysics Data System (ADS)

Kim, Hyun-Sok; Hyun, Min-Sung; Ju, Jae-Wuk; Kim, Young-Sik; Lambregts, Cees; van Rhee, Peter; Kim, Johan; McNamara, Elliott; Tel, Wim; Böcker, Paul; Oh, Nang-Lyeom; Lee, Jun-Hyung

2018-03-01

Computational metrology has been proposed as the way forward to resolve the need for increased metrology density, resulting from extending correction capabilities, without adding actual metrology budget. By exploiting TWINSCAN based metrology information, dense overlay fingerprints for every wafer can be computed. This extended metrology dataset enables new use cases, such as monitoring and control based on fingerprints for every wafer of the lot. This paper gives a detailed description, discusses the accuracy of the fingerprints computed, and will show results obtained in a DRAM HVM manufacturing environment. Also an outlook for improvements and extensions will be shared.

Establishing traceability of photometric absorbance values for accurate measurements of the haemoglobin concentration in blood

NASA Astrophysics Data System (ADS)

Witt, K.; Wolf, H. U.; Heuck, C.; Kammel, M.; Kummrow, A.; Neukammer, J.

2013-10-01

Haemoglobin concentration in blood is one of the most frequently measured analytes in laboratory medicine. Reference and routine methods for the determination of the haemoglobin concentration in blood are based on the conversion of haeme, haemoglobin and haemiglobin species into uniform end products. The total haemoglobin concentration in blood is measured using the absorbance of the reaction products. Traceable absorbance measurement values on the highest metrological level are a prerequisite for the calibration and evaluation of procedures with respect to their suitability for routine measurements and their potential as reference measurement procedures. For this purpose, we describe a procedure to establish traceability of spectral absorbance measurements for the haemiglobincyanide (HiCN) method and for the alkaline haematin detergent (AHD) method. The latter is characterized by a higher stability of the reaction product. In addition, the toxic hazard of cyanide, which binds to the iron ion of the haem group and thus inhibits the oxygen transport, is avoided. Traceability is established at different wavelengths by applying total least-squares analysis to derive the conventional quantity values for the absorbance from the measured values. Extrapolation and interpolation are applied to get access to the spectral regions required to characterize the Q-absorption bands of the HiCN and AHD methods, respectively. For absorbance values between 0.3 and 1.8, the contributions of absorbance measurements to the total expanded uncertainties (95% level of confidence) of absorbance measurements range from 1% to 0.4%.

Characterization of potassium dichromate solutions for spectrophotometercalibration

NASA Astrophysics Data System (ADS)

Conceição, F. C.; Silva, E. M.; Gomes, J. F. S.; Borges, P. P.

2018-03-01

Spectrophotometric analysis in the ultraviolet (UV) region is used in the determination of several quantitative and qualitative parameters. For ensuring reliability of the analyses performed on the spectrophotometers, verification / calibration of the equipment must be performed periodically using certified reference materials (CRMs). This work presents the characterization stage needed for producing this CRM. The property value characterized was the absorbance for the wavelengths in the UV spectral regions. This CRM will contribute to guarantee the accuracy and linearity of the absorbance scale to the spectrophotometers, through which analytical measurement results will be provided with metrological traceability.

Software for imaging phase-shift interference microscope

NASA Astrophysics Data System (ADS)

Malinovski, I.; França, R. S.; Couceiro, I. B.

2018-03-01

In recent years absolute interference microscope was created at National Metrology Institute of Brazil (INMETRO). The instrument by principle of operation is imaging phase-shifting interferometer (PSI) equipped with two stabilized lasers of different colour as traceable reference wavelength sources. We report here some progress in development of the software for this instrument. The status of undergoing internal validation and verification of the software is also reported. In contrast with standard PSI method, different methodology of phase evaluation is applied. Therefore, instrument specific procedures for software validation and verification are adapted and discussed.

A combined scanning tunnelling microscope and x-ray interferometer

NASA Astrophysics Data System (ADS)

Yacoot, Andrew; Kuetgens, Ulrich; Koenders, Ludger; Weimann, Thomas

2001-10-01

A monolithic x-ray interferometer made from silicon and a scanning tunnelling microscope have been combined and used to calibrate grating structures with periodicities of 100 nm or less. The x-ray interferometer is used as a translation stage which moves in discrete steps of 0.192 nm, the lattice spacing of the silicon (220) planes. Hence, movements are traceable to the definition of the metre and the nonlinearity associated with the optical interferometers used to measure displacement in more conventional metrological scanning probe microscopes (MSPMs) removed.

7/5nm logic manufacturing capabilities and requirements of metrology

NASA Astrophysics Data System (ADS)

Bunday, Benjamin; Bello, A. F.; Solecky, Eric; Vaid, Alok

2018-03-01

This paper will provide an update to previous works [2][4][9] to our view of the future for in-line high volume manufacturing (HVM) metrology for the semiconductor industry, concentrating on logic technology for foundries. First, we will review of the needs of patterned defect, critical dimensional (CD/3D), overlay and films metrology, and present the extensive list of applications for which metrology solutions are needed. We will then update the industry's progress towards addressing gating technical limits of the most important of these metrology solutions, highlighting key metrology technology gaps requiring industry attention and investment.

The role of LATU as national metrology institute of Uruguay and its responsibilities

NASA Astrophysics Data System (ADS)

Robatto, O.; Quagliata, E.; Santo, C.; Sica, A.; Sponton, M.

2013-09-01

Laboratorio Tecnológico del Uruguay (LATU) is the National Metrology Institute of Uruguay and has the obligation to maintain the national standards stated by National Law 15298. At present LATU is acting as a secondary laboratory as well as a primary laboratory. LATU was ISO 17025:2005 DKD (Deutscher Kalibrierdienst) accredited from 2001 up to 2007. By that time LATU decided to support its Capabilities of Measurement and Calibration (CMCs) at CIPM-MRA (Mutual Recognition Arrangement between national metrology institutes (NMIs)) by peer assessment. A Peer Review has been done in 2008 in order to get the QSTF (Sistema Interamericano de Metrología, Quality System Task Force) approval. "New "CMCs for Industrial Thermometers have been approved by the JCRB on September 2010. CMCs claimed for Standard Resistance Platinum Thermometers (SPRTs) calibration at fixed points have not been approved yet because there were some requirements of traceability of employed cells that were not fulfilled but will be solved properly. The declared CMCs have been chosen by LATU in order to cover the increasing calibration services required by the industry and the secondary calibration laboratories. To demonstrate its technical competence an support its declared "CMCs" LATU has also participated at bilateral and regional comparisons. In recent years LATU, the National Accreditation Body (OUA), the Standards Institute, the National Institute of Quality and Compliance Bodies have become Members of a new Institution to strengthen the Quality Infrastructure of the country (SUNAMEC). As part of this new activities, LATU is giving training courses to the secondary laboratories performing calibrations in temperature that want to get accredited by the National Accreditation Body and to act as Technical Evaluators or Auditors when required by OUA. It is expected, that in the future and in the frame of new accredited and recognized temperature calibration laboratories, LATU could strengthen its activities in maintaining its own national standards, developing new calibration services and performing comparisons as pilot laboratory for Uruguay and also regionally. The role of secondary laboratory could be diminished and therefore the activities as a reference laboratory in investigation would be benefited. This paper describes all the activities carried out at LATU in Temperature in the last years to reach the goals stated and the coming ones that have to be done to help developing main objectives as a country in this field.

Development of High-purity Certified Reference Materials for 17 Proteinogenic Amino Acids by Traceable Titration Methods.

PubMed

Kato, Megumi; Yamazaki, Taichi; Kato, Hisashi; Eyama, Sakae; Goto, Mari; Yoshioka, Mariko; Takatsu, Akiko

2015-01-01

To ensure the reliability of amino acid analyses, the National Metrology Institute of Japan of the National Institute of Advanced Industrial Science and Technology (NMIJ/AIST) has developed high-purity certified reference materials (CRMs) for 17 proteinogenic amino acids. These CRMs are intended for use as primary reference materials to enable the traceable quantification of amino acids. The purity of the present CRMs was determined based on two traceable methods: nonaqueous acidimetric titration and nitrogen determination by the Kjeldahl method. Since neither method could distinguish compounds with similar structures, such as amino acid-related impurities, impurities were thoroughly quantified by combining several HPLC methods, and subtracted from the obtained purity of each method. The property value of each amino acid was calculated as a weighted mean of the corrected purities by the two methods. The uncertainty of the property value was obtained by combining measurement uncertainties of the two methods, a difference between the two methods, the uncertainty from the contribution of impurities, and the uncertainty derived from inhomogeneity. The uncertainty derived from instability was considered to be negligible based on stability monitoring of some CRMs. The certified value of each amino acid, property value with uncertainty, was given for both with or without enantiomeric separation.

Metrological traceability in education: A practical online system for measuring and managing middle school mathematics instruction

NASA Astrophysics Data System (ADS)

Torres Irribarra, D.; Freund, R.; Fisher, W.; Wilson, M.

2015-02-01

Computer-based, online assessments modelled, designed, and evaluated for adaptively administered invariant measurement are uniquely suited to defining and maintaining traceability to standardized units in education. An assessment of this kind is embedded in the Assessing Data Modeling and Statistical Reasoning (ADM) middle school mathematics curriculum. Diagnostic information about middle school students' learning of statistics and modeling is provided via computer-based formative assessments for seven constructs that comprise a learning progression for statistics and modeling from late elementary through the middle school grades. The seven constructs are: Data Display, Meta-Representational Competence, Conceptions of Statistics, Chance, Modeling Variability, Theory of Measurement, and Informal Inference. The end product is a web-delivered system built with Ruby on Rails for use by curriculum development teams working with classroom teachers in designing, developing, and delivering formative assessments. The online accessible system allows teachers to accurately diagnose students' unique comprehension and learning needs in a common language of real-time assessment, logging, analysis, feedback, and reporting.

Laboratories new to the ICRM.

PubMed

Karam, Lisa; Anagnostakis, Marios J; Gudelis, Arunas; Marsoem, Pujadi; Mauring, Alexander; Wurdiyanto, Gatot; Yücel, Ülkü

2012-09-01

The Scientific Committee of the ICRM decided, for the 2011 Conference, to present laboratories that are at a key developmental stage in establishing, expanding or applying radionuclide metrology capabilities. The expansion of radionuclide metrology capabilities is crucial to meet evolving and emerging needs in health care, environmental monitoring, and nuclear energy. Five laboratories (from Greece, Lithuania, Indonesia, Norway and Turkey) agreed to participate. Each laboratory is briefly introduced, and examples of their capabilities and standardization activities are discussed. Published by Elsevier Ltd.

Assessing the Economic and National Security Benefits from Publicly Funded Technology Investments: An IDA Round Table.

DTIC Science & Technology

1995-09-01

strong commitment today, as in the past, is that of metrology —the science and technology of measurement. Metrology has applications in the areas of...problem- solving approach: NIST has earned a worldwide reputation for impartiality and techni- cal excellence. Its competencies in metrology —the science... metrological development5 NIST’s evaluations of industry’s technology needs indicate widespread demand for enhanced measurement capabilities, and

FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer

PubMed Central

Vera-Salas, Luis Alberto; Moreno-Tapia, Sandra Veronica; Garcia-Perez, Arturo; de Jesus Romero-Troncoso, Rene; Osornio-Rios, Roque Alfredo; Serroukh, Ibrahim; Cabal-Yepez, Eduardo

2011-01-01

The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application. PMID:22164040

An atomic force microscope for the study of the effects of tip sample interactions on dimensional metrology

NASA Astrophysics Data System (ADS)

Yacoot, Andrew; Koenders, Ludger; Wolff, Helmut

2007-02-01

An atomic force microscope (AFM) has been developed for studying interactions between the AFM tip and the sample. Such interactions need to be taken into account when making quantitative measurements. The microscope reported here has both the conventional beam deflection system and a fibre optical interferometer for measuring the movement of the cantilever. Both can be simultaneously used so as to not only servo control the tip movements, but also detect residual movement of the cantilever. Additionally, a high-resolution homodyne differential optical interferometer is used to measure the vertical displacement between the cantilever holder and the sample, thereby providing traceability for vertical height measurements. The instrument is compatible with an x-ray interferometer, thereby facilitating high resolution one-dimensional scans in the X-direction whose metrology is based on the silicon d220 lattice spacing (0.192 nm). This paper concentrates on the first stage of the instrument's development and presents some preliminary results validating the instrument's performance and showing its potential.

Cryogenic flow rate measurement with a laser Doppler velocimetry standard

NASA Astrophysics Data System (ADS)

Maury, R.; Strzelecki, A.; Auclercq, C.; Lehot, Y.; Loubat, S.; Chevalier, J.; Ben Rayana, F.

2018-03-01

A very promising alternative to the state-of-the-art static volume measurements for liquefied natural gas (LNG) custody transfer processes is the dynamic principle of flow metering. As the Designated Institute (DI) of the LNE (‘Laboratoire National de métrologie et d’Essais’, being the French National Metrology Institute) for high-pressure gas flow metering, Cesame-Exadebit is involved in various research and development programs. Within the framework of the first (2010-2013) and second (2014-2017) EURAMET Joint Research Project (JRP), named ‘Metrological support for LNG custody transfer and transport fuel applications’, Cesame-Exadebit explored a novel cryogenic flow metering technology using laser Doppler velocimetry (LDV) as an alternative to ultrasonic and Coriolis flow metering. Cesame-Exadebit is trying to develop this technique as a primary standard for cryogenic flow meters. Currently, cryogenic flow meters are calibrated at ambient temperatures with water. Results are then extrapolated to be in the Reynolds number range of real applications. The LDV standard offers a unique capability to perform online calibration of cryogenic flow meters in real conditions (temperature, pressure, piping and real flow disturbances). The primary reference has been tested on an industrial process in a LNG terminal during truck refuelling. The reference can calibrate Coriolis flow meters being used daily with all the real environmental constraints, and its utilisation is transparent for LNG terminal operators. The standard is traceable to Standard International units and the combined extended uncertainties have been determined and estimated to be lower than 0.6% (an ongoing improvement to reducing the correlation function uncertainty, which has a major impact in the uncertainty estimation).

Calibration and verification of thermographic cameras for geometric measurements

NASA Astrophysics Data System (ADS)

Lagüela, S.; González-Jorge, H.; Armesto, J.; Arias, P.

2011-03-01

Infrared thermography is a technique with an increasing degree of development and applications. Quality assessment in the measurements performed with the thermal cameras should be achieved through metrology calibration and verification. Infrared cameras acquire temperature and geometric information, although calibration and verification procedures are only usual for thermal data. Black bodies are used for these purposes. Moreover, the geometric information is important for many fields as architecture, civil engineering and industry. This work presents a calibration procedure that allows the photogrammetric restitution and a portable artefact to verify the geometric accuracy, repeatability and drift of thermographic cameras. These results allow the incorporation of this information into the quality control processes of the companies. A grid based on burning lamps is used for the geometric calibration of thermographic cameras. The artefact designed for the geometric verification consists of five delrin spheres and seven cubes of different sizes. Metrology traceability for the artefact is obtained from a coordinate measuring machine. Two sets of targets with different reflectivity are fixed to the spheres and cubes to make data processing and photogrammetric restitution possible. Reflectivity was the chosen material propriety due to the thermographic and visual cameras ability to detect it. Two thermographic cameras from Flir and Nec manufacturers, and one visible camera from Jai are calibrated, verified and compared using calibration grids and the standard artefact. The calibration system based on burning lamps shows its capability to perform the internal orientation of the thermal cameras. Verification results show repeatability better than 1 mm for all cases, being better than 0.5 mm for the visible one. As it must be expected, also accuracy appears higher in the visible camera, and the geometric comparison between thermographic cameras shows slightly better results for the Nec camera.

Dielectric Spectroscopic Detection of Early Failures in 3-D Integrated Circuits.

PubMed

Obeng, Yaw; Okoro, C A; Ahn, Jung-Joon; You, Lin; Kopanski, Joseph J

The commercial introduction of three dimensional integrated circuits (3D-ICs) has been hindered by reliability challenges, such as stress related failures, resistivity changes, and unexplained early failures. In this paper, we discuss a new RF-based metrology, based on dielectric spectroscopy, for detecting and characterizing electrically active defects in fully integrated 3D devices. These defects are traceable to the chemistry of the insolation dielectrics used in the through silicon via (TSV) construction. We show that these defects may be responsible for some of the unexplained early reliability failures observed in TSV enabled 3D devices.

A dynamic gravimetric standard for trace water.

PubMed

Brewer, P J; Goody, B A; Woods, P T; Milton, M J T

2011-10-01

A system for generating traceable reference standards of water vapor at trace levels between 5 and 2000 nmol/mol has been developed. It can provide different amount fractions of trace water vapor by using continuous accurate measurements of mass loss from a permeation device coupled with a dilution system based on an array of critical flow orifices. An estimated relative expanded uncertainty of ±2% has been achieved for most amount fractions generated. The system has been used in an international comparison and demonstrates excellent comparability with National Metrology Institutes maintaining standards of water vapor in this range using other methods.

Modernization of Koesters interferometer and high accuracy calibration gauge blocks

NASA Astrophysics Data System (ADS)

França, R. S.; Silva, I. L. M.; Couceiro, I. B.; Torres, M. A. C.; Bessa, M. S.; Costa, P. A.; Oliveira, W., Jr.; Grieneisen, H. P. H.

2016-07-01

The Optical Metrology Division (Diopt) of Inmetro is responsible for maintaining the national reference of the length unit according to International System of Units (SI) definitions. The length unit is realized by interferometric techniques and is disseminated to the dimensional community through calibrations of gauge blocks. Calibration of large gauge blocks from 100 mm to 1000 mm has been performed by Diopt with a Koesters interferometer with reference to spectral lines of a krypton discharge lamp. Replacement of this lamp by frequency stabilized lasers, traceable now to the time and frequency scale, is described and the first results are reported.

Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing.

NASA Astrophysics Data System (ADS)

Benschop, Jos; Engelen, Andre; Cramer, Hugo; Kubis, Michael; Hinnen, Paul; van der Laan, Hans; Bhattacharyya, Kaustuve; Mulkens, Jan

2013-04-01

The overlay, CDU and focus requirements for the 20nm node can only be met using a holistic lithography approach whereby full use is made of high-order, field-by-field, scanner correction capabilities. An essential element in this approach is a fast, precise and accurate in-line metrology sensor, capable to measure on product. The capabilities of the metrology sensor as well as the impact on overlay, CD and focus will be shared in this paper.

Massive metrology using fast e-beam technology improves OPC model accuracy by >2x at faster turnaround time

NASA Astrophysics Data System (ADS)

Zhao, Qian; Wang, Lei; Wang, Jazer; Wang, ChangAn; Shi, Hong-Fei; Guerrero, James; Feng, Mu; Zhang, Qiang; Liang, Jiao; Guo, Yunbo; Zhang, Chen; Wallow, Tom; Rio, David; Wang, Lester; Wang, Alvin; Wang, Jen-Shiang; Gronlund, Keith; Lang, Jun; Koh, Kar Kit; Zhang, Dong Qing; Zhang, Hongxin; Krishnamurthy, Subramanian; Fei, Ray; Lin, Chiawen; Fang, Wei; Wang, Fei

2018-03-01

Classical SEM metrology, CD-SEM, uses low data rate and extensive frame-averaging technique to achieve high-quality SEM imaging for high-precision metrology. The drawbacks include prolonged data collection time and larger photoresist shrinkage due to excess electron dosage. This paper will introduce a novel e-beam metrology system based on a high data rate, large probe current, and ultra-low noise electron optics design. At the same level of metrology precision, this high speed e-beam metrology system could significantly shorten data collection time and reduce electron dosage. In this work, the data collection speed is higher than 7,000 images per hr. Moreover, a novel large field of view (LFOV) capability at high resolution was enabled by an advanced electron deflection system design. The area coverage by LFOV is >100x larger than classical SEM. Superior metrology precision throughout the whole image has been achieved, and high quality metrology data could be extracted from full field. This new capability on metrology will further improve metrology data collection speed to support the need for large volume of metrology data from OPC model calibration of next generation technology. The shrinking EPE (Edge Placement Error) budget places more stringent requirement on OPC model accuracy, which is increasingly limited by metrology errors. In the current practice of metrology data collection and data processing to model calibration flow, CD-SEM throughput becomes a bottleneck that limits the amount of metrology measurements available for OPC model calibration, impacting pattern coverage and model accuracy especially for 2D pattern prediction. To address the trade-off in metrology sampling and model accuracy constrained by the cycle time requirement, this paper employs the high speed e-beam metrology system and a new computational software solution to take full advantage of the large volume data and significantly reduce both systematic and random metrology errors. The new computational software enables users to generate large quantity of highly accurate EP (Edge Placement) gauges and significantly improve design pattern coverage with up to 5X gain in model prediction accuracy on complex 2D patterns. Overall, this work showed >2x improvement in OPC model accuracy at a faster model turn-around time.

Catalog of Federal metrology and calibration capabilities: 1980 edition

NASA Astrophysics Data System (ADS)

Leedy, K. O.

1980-09-01

Federal laboratories involved in metrology and calibration are listed. Included is the name of a person to contact at each laboratory telephone number and address. The capabilities of each laboratory are indicated in a tabular listing by agency. To provide geographical distribution, the laboratories are listed by States. In addition, the laboratories are shown on a map by coded number. Other references are described.

Metrology needs for the semiconductor industry over the next decade

NASA Astrophysics Data System (ADS)

Melliar-Smith, Mark; Diebold, Alain C.

1998-11-01

Metrology will continue to be a key enabler for the development and manufacture of future generations of integrated circuits. During 1997, the Semiconductor Industry Association renewed the National Technology Roadmap for Semiconductors (NTRS) through the 50 nm technology generation and for the first time included a Metrology Roadmap (1). Meeting the needs described in the Metrology Roadmap will be both a technological and financial challenge. In an ideal world, metrology capability would be available at the start of process and tool development, and silicon suppliers would have 450 mm wafer capable metrology tools in time for development of that wafer size. Unfortunately, a majority of the metrology suppliers are small companies that typically can't afford the additional two to three year wait for return on R&D investment. Therefore, the success of the semiconductor industry demands that we expand cooperation between NIST, SEMATECH, the National Labs, SRC, and the entire community. In this paper, we will discuss several critical metrology topics including the role of sensor-based process control, in-line microscopy, focused measurements for transistor and interconnect fabrication, and development needs. Improvements in in-line microscopy must extend existing critical dimension measurements up to 100 nm generations and new methods may be required for sub 100 nm generations. Through development, existing metrology dielectric thickness and dopant dose and junction methods can be extended to 100 nm, but new and possibly in-situ methods are needed beyond 100 nm. Interconnect process control will undergo change before 100 nm due to the introduction of copper metallization, low dielectric constant interlevel dielectrics, and Damascene process flows.

Application of advanced diffraction based optical metrology overlay capabilities for high-volume manufacturing

NASA Astrophysics Data System (ADS)

Chen, Kai-Hsiung; Huang, Guo-Tsai; Hsieh, Hung-Chih; Ni, Wei-Feng; Chuang, S. M.; Chuang, T. K.; Ke, Chih-Ming; Huang, Jacky; Rao, Shiuan-An; Cumurcu Gysen, Aysegul; d'Alfonso, Maxime; Yueh, Jenny; Izikson, Pavel; Soco, Aileen; Wu, Jon; Nooitgedagt, Tjitte; Ottens, Jeroen; Kim, Yong Ho; Ebert, Martin

2017-03-01

On-product overlay requirements are becoming more challenging with every next technology node due to the continued decrease of the device dimensions and process tolerances. Therefore, current and future technology nodes require demanding metrology capabilities such as target designs that are robust towards process variations and high overlay measurement density (e.g. for higher order process corrections) to enable advanced process control solutions. The impact of advanced control solutions based on YieldStar overlay data is being presented in this paper. Multi patterning techniques are applied for critical layers and leading to additional overlay measurement demands. The use of 1D process steps results in the need of overlay measurements relative to more than one layer. Dealing with the increased number of overlay measurements while keeping the high measurement density and metrology accuracy at the same time presents a challenge for high volume manufacturing (HVM). These challenges are addressed by the capability to measure multi-layer targets with the recently introduced YieldStar metrology tool, YS350. On-product overlay results of such multi-layers and standard targets are presented including measurement stability performance.

Analysis of selected volatile organic compounds at background level in South Africa.

NASA Astrophysics Data System (ADS)

Ntsasa, Napo; Tshilongo, James; Lekoto, Goitsemang

2017-04-01

Volatile organic compounds (VOC) are measured globally at urban air pollution monitoring and background level at specific locations such as the Cape Point station. The urban pollution monitoring is legislated at government level; however, the background levels are scientific outputs of the World Meteorological Organisation Global Atmospheric Watch program (WMO/GAW). The Cape Point is a key station in the Southern Hemisphere which monitors greenhouse gases and halocarbons, with reported for over the past decade. The Cape Point station does not have the measurement capability VOC's currently. A joint research between the Cape Point station and the National Metrology Institute of South Africa (NMISA) objective is to perform qualitative and quantitative analysis of volatile organic compounds listed in the GAW program. NMISA is responsible for development, maintain and disseminate primary reference gas mixtures which are directly traceable to the International System of Units (SI) The results of some volatile organic compounds which where sampled in high pressure gas cylinders will be presented. The analysis of samples was performed on the gas chromatography with flame ionisation detector and mass selective detector (GC-FID/MSD) with a dedicate cryogenic pre-concentrator system. Keywords: volatile organic compounds, gas chromatography, pre-concentrator

Ensuring Food Integrity by Metrology and FAIR Data Principles

PubMed Central

Rychlik, Michael; Zappa, Giovanna; Añorga, Larraitz; Belc, Nastasia; Castanheira, Isabel; Donard, Olivier F. X.; Kouřimská, Lenka; Ogrinc, Nives; Ocké, Marga C.; Presser, Karl; Zoani, Claudia

2018-01-01

Food integrity is a general term for sound, nutritive, healthy, tasty, safe, authentic, traceable, as well as ethically, safely, environment-friendly, and sustainably produced foods. In order to verify these properties, analytical methods with a higher degree of accuracy, sensitivity, standardization and harmonization and a harmonized system for their application in analytical laboratories are required. In this view, metrology offers the opportunity to achieve these goals. In this perspective article the current global challenges in food analysis and the principles of metrology to fill these gaps are presented. Therefore, the pan-European project METROFOOD-RI within the framework of the European Strategy Forum on Research Infrastructures (ESFRI) was developed to establish a strategy to allow reliable and comparable analytical measurements in foods along the whole process line starting from primary producers until consumers and to make all data findable, accessible, interoperable, and re-usable according to the FAIR data principles. The initiative currently consists of 48 partners from 18 European Countries and concluded its “Early Phase” as research infrastructure by organizing its future structure and presenting a proof of concept by preparing, distributing and comprehensively analyzing three candidate Reference Materials (rice grain, rice flour, and oyster tissue) and establishing a system how to compile, process, and store the generated data and how to exchange, compare them and make them accessible in data bases. PMID:29872651

Ensuring Food Integrity by Metrology and FAIR Data Principles

NASA Astrophysics Data System (ADS)

Rychlik, Michael; Zappa, Giovanna; Añorga, Larraitz; Belc, Nastasia; Castanheira, Isabel; Donard, Olivier F. X.; Kouřimská, Lenka; Ogrinc, Nives; Ocké, Marga C.; Presser, Karl; Zoani, Claudia

2018-05-01

Food integrity is a general term for sound, nutritive, healthy, tasty, safe, authentic, traceable, as well as ethically, safely, environment-friendly and sustainably produced foods. In order to verify these properties, analytical methods with a higher degree of accuracy, sensitivity, standardization and harmonization and a harmonized system for their application in analytical laboratories are required. In this view, metrology offers the opportunity to achieve these goals. In this perspective article the current global challenges in food analysis and the principles of metrology to fill these gaps are presented. Therefore, the pan-European project METROFOOD-RI within the framework of the European Strategy Forum on Research Infrastructures (ESFRI) was developed to establish a strategy to allow reliable and comparable analytical measurements in foods along the whole process line starting from primary producers until consumers and to make all data findable, accessible, interoperable, and re-usable according to the FAIR data principles. The initiative currently consists of 48 partners from 18 European Countries and concluded its “Early Phase” as research infrastructure by organizing its future structure and presenting a proof of concept by preparing, distributing and comprehensively analyzing three candidate Reference Materials (rice grain, rice flour and oyster tissue) and establishing a system how to compile, process and store the generated data and how to exchange, compare them and make them accessible in data bases.

Ensuring Food Integrity by Metrology and FAIR Data Principles.

PubMed

Rychlik, Michael; Zappa, Giovanna; Añorga, Larraitz; Belc, Nastasia; Castanheira, Isabel; Donard, Olivier F X; Kouřimská, Lenka; Ogrinc, Nives; Ocké, Marga C; Presser, Karl; Zoani, Claudia

2018-01-01

Food integrity is a general term for sound, nutritive, healthy, tasty, safe, authentic, traceable, as well as ethically, safely, environment-friendly, and sustainably produced foods. In order to verify these properties, analytical methods with a higher degree of accuracy, sensitivity, standardization and harmonization and a harmonized system for their application in analytical laboratories are required. In this view, metrology offers the opportunity to achieve these goals. In this perspective article the current global challenges in food analysis and the principles of metrology to fill these gaps are presented. Therefore, the pan-European project METROFOOD-RI within the framework of the European Strategy Forum on Research Infrastructures (ESFRI) was developed to establish a strategy to allow reliable and comparable analytical measurements in foods along the whole process line starting from primary producers until consumers and to make all data findable, accessible, interoperable, and re-usable according to the FAIR data principles. The initiative currently consists of 48 partners from 18 European Countries and concluded its "Early Phase" as research infrastructure by organizing its future structure and presenting a proof of concept by preparing, distributing and comprehensively analyzing three candidate Reference Materials (rice grain, rice flour, and oyster tissue) and establishing a system how to compile, process, and store the generated data and how to exchange, compare them and make them accessible in data bases.

CD-SEM metrology and OPC modeling for 2D patterning in advanced technology nodes (Conference Presentation)

NASA Astrophysics Data System (ADS)

Wallow, Thomas I.; Zhang, Chen; Fumar-Pici, Anita; Chen, Jun; Laenens, Bart; Spence, Christopher A.; Rio, David; van Adrichem, Paul; Dillen, Harm; Wang, Jing; Yang, Peng-Cheng; Gillijns, Werner; Jaenen, Patrick; van Roey, Frieda; van de Kerkhove, Jeroen; Babin, Sergey

2017-03-01

In the course of assessing OPC compact modeling capabilities and future requirements, we chose to investigate the interface between CD-SEM metrology methods and OPC modeling in some detail. Two linked observations motivated our study: 1) OPC modeling is, in principle, agnostic of metrology methods and best practice implementation. 2) Metrology teams across the industry use a wide variety of equipment, hardware settings, and image/data analysis methods to generate the large volumes of CD-SEM measurement data that are required for OPC in advanced technology nodes. Initial analyses led to the conclusion that many independent best practice metrology choices based on systematic study as well as accumulated institutional knowledge and experience can be reasonably made. Furthermore, these choices can result in substantial variations in measurement of otherwise identical model calibration and verification patterns. We will describe several experimental 2D test cases (i.e., metal, via/cut layers) that examine how systematic changes in metrology practice impact both the metrology data itself and the resulting full chip compact model behavior. Assessment of specific methodology choices will include: • CD-SEM hardware configurations and settings: these may range from SEM beam conditions (voltage, current, etc.,) to magnification, to frame integration optimizations that balance signal-to-noise vs. resist damage. • Image and measurement optimization: these may include choice of smoothing filters for noise suppression, threshold settings, etc. • Pattern measurement methodologies: these may include sampling strategies, CD- and contour- based approaches, and various strategies to optimize the measurement of complex 2D shapes. In addition, we will present conceptual frameworks and experimental methods that allow practitioners of OPC metrology to assess impacts of metrology best practice choices on model behavior. Finally, we will also assess requirements posed by node scaling on OPC model accuracy, and evaluate potential consequences for CD-SEM metrology capabilities and practices.

EDITORIAL: Nanometrology Nanometrology

NASA Astrophysics Data System (ADS)

Tanaka, Mitsuru; Baba, Tetsuya; Postek, Michael T.

2011-02-01

Nanomanufacturing is an essential bridge between the discoveries of nanoscience and real-world nanotech products and is the vehicle by which the world will realize the promise of major technological innovation across a spectrum of products that will affect virtually every industrial sector. For micro and nanotech products to achieve the broad impacts envisioned, they must be manufactured in market-appropriate quantities in a reliable, repeatable, economical and commercially viable manner. In addition, they must be manufactured so that environmental and human health concerns are met, worker safety issues are appropriately assessed and handled, and liability issues are addressed. Critical to this realization of robust manufacturing at the nanoscale is the development of the necessary instrumentation, metrology and standards, i.e. nanometrology. The National Measurement Laboratories are committed to developing the required metrology. Integration of the instruments, their interoperability and appropriate information management are also critical elements that must be considered for viable micro and nanomanufacturing. Advanced instrumentation, metrology and standards will allow the physical dimensions, properties, functionality and purity of the materials, processes, tools, systems, products and emissions that will constitute micro and nanomanufacturing to be measured and characterized. This will in turn enable production to be scalable, controllable, predictable and repeatable to meet market needs. If a product cannot be measured it cannot be manufactured; if that product cannot be made safely it should not be manufactured, and finally, if the metrology is not in place how would you know? The articles in this special feature can be classified into three categories: dimensional metrology (8 papers and one technical design note), density of particles (2 papers) and metrology of thermal properties (3 papers). The articles on dimensional metrology include scanning probe microscope dimensional metrology, the through focus scanning optical (TSOM) imaging method, scatterfield optical microscopy, helium ion microscopy, metrology and combinations of these microscopy and imaging techniques applied to nanostructures and particles such as cellulose nanocrystals, and targeted liposome-based delivery systems. Dimensional metrology covers grating pitch measurement by optical diffraction, measurement of the thickness of silicon oxide by synchrotron radiation x-ray photoelectron spectroscopy (SR-XPS) analysis and determination of pore size distribution of porous low-dielectric-constant films by x-ray scattering. The two papers on particle density present number concentration standards for aerosol nanoparticles of larger diameter than about 10 nm and liquid-borne particles in the range of 10-20 µm diameter, respectively. The three papers on metrology of thermal properties present recent innovative progress in thermophysical metrology of thin films by the ultrafast laser flash methods required for understanding of the thermal science at nanoscales and thermal design of nanodevices. The first paper improves the technology applicable under high pressures in a diamond anvil cell. The second extends this technology to thin films on silicon substrates. The third reports the first observation of non-diffusive heat transfer across thin films at low temperatures. In order to guarantee reliability and traceability of developed measurement methods for nanomaterials, a technical infrastructure for nanomaterials such as metrological standards, reference materials and document standards for measurement methods is important. We hope this special feature will be the first step in a collaboration towards a global harmonization of nanometrology.

Enhanced resolution and accuracy of freeform metrology through Subaperture Stitching Interferometry

NASA Astrophysics Data System (ADS)

Supranowitz, Chris; Maloney, Chris; Murphy, Paul; Dumas, Paul

2017-10-01

Recent advances in polishing and metrology have addressed many of the challenges in the fabrication and metrology of freeform surfaces, and the manufacture of these surfaces is possible today. However, achieving the form and mid-spatial frequency (MSF) specifications that are typical of visible imaging systems remains a challenge. Interferometric metrology for freeform surfaces is thus highly desirable for such applications, but the capability is currently quite limited for freeforms. In this paper, we provide preliminary results that demonstrate accurate, high-resolution measurements of freeform surfaces using prototype software on QED's ASI™ (Aspheric Stitching Interferometer).

Development of an air flow calorimeter prototype for the measurement of thermal power released by large radioactive waste packages.

PubMed

Razouk, R; Beaumont, O; Failleau, G; Hay, B; Plumeri, S

2018-03-01

The estimation and control of the thermal power released by the radioactive waste packages are a key parameter in the management of radioactive waste geological repository sites. In the framework of the European project "Metrology for decommissioning nuclear facilities," the French National Agency of Radioactive Waste Management (ANDRA) collaborates with Laboratoire National de Métrologie et D'essais in order to measure the thermal power up to 500 W of typical real size radioactive waste packages (of at least 0.175 m 3 ) with an uncertainty better than 5% by using a measurement method traceable to the international system of units. One of the selected metrological approaches is based on the principles of air flow calorimetry. This paper describes in detail the development of the air flow calorimeter prototype as well as the design of a radioactive waste package simulator used for its calibration. Results obtained from the calibration of the calorimeter and from the determination of thermal powers are presented here with an investigation of the measurement uncertainties.

The radiation metrology network related to the field of mammography: implementation and uncertainty analysis of the calibration system

NASA Astrophysics Data System (ADS)

Peixoto, J. G. P.; de Almeida, C. E.

2001-09-01

It is recognized by the international guidelines that it is necessary to offer calibration services for mammography beams in order to improve the quality of clinical diagnosis. Major efforts have been made by several laboratories in order to establish an appropriate and traceable calibration infrastructure and to provide the basis for a quality control programme in mammography. The contribution of the radiation metrology network to the users of mammography is reviewed in this work. Also steps required for the implementation of a mammography calibration system using a constant potential x-ray and a clinical mammography x-ray machine are presented. The various qualities of mammography radiation discussed in this work are in accordance with the IEC 61674 and the AAPM recommendations. They are at present available at several primary standard dosimetry laboratories (PSDLs), namely the PTB, NIST and BEV and a few secondary standard dosimetry laboratories (SSDLs) such as at the University of Wisconsin and at the IAEA's SSDL. We discuss the uncertainties involved in all steps of the calibration chain in accord with the ISO recommendations.

Development of an air flow calorimeter prototype for the measurement of thermal power released by large radioactive waste packages

NASA Astrophysics Data System (ADS)

Razouk, R.; Beaumont, O.; Failleau, G.; Hay, B.; Plumeri, S.

2018-03-01

The estimation and control of the thermal power released by the radioactive waste packages are a key parameter in the management of radioactive waste geological repository sites. In the framework of the European project "Metrology for decommissioning nuclear facilities," the French National Agency of Radioactive Waste Management (ANDRA) collaborates with Laboratoire National de Métrologie et D'essais in order to measure the thermal power up to 500 W of typical real size radioactive waste packages (of at least 0.175 m3) with an uncertainty better than 5% by using a measurement method traceable to the international system of units. One of the selected metrological approaches is based on the principles of air flow calorimetry. This paper describes in detail the development of the air flow calorimeter prototype as well as the design of a radioactive waste package simulator used for its calibration. Results obtained from the calibration of the calorimeter and from the determination of thermal powers are presented here with an investigation of the measurement uncertainties.

Metrology of human-based and other qualitative measurements

NASA Astrophysics Data System (ADS)

Pendrill, Leslie; Petersson, Niclas

2016-09-01

The metrology of human-based and other qualitative measurements is in its infancy—concepts such as traceability and uncertainty are as yet poorly developed. This paper reviews how a measurement system analysis approach, particularly invoking as performance metric the ability of a probe (such as a human being) acting as a measurement instrument to make a successful decision, can enable a more general metrological treatment of qualitative observations. Measures based on human observations are typically qualitative, not only in sectors, such as health care, services and safety, where the human factor is obvious, but also in customer perception of traditional products of all kinds. A principal challenge is that the usual tools of statistics normally employed for expressing measurement accuracy and uncertainty will probably not work reliably if relations between distances on different portions of scales are not fully known, as is typical of ordinal or other qualitative measurements. A key enabling insight is to connect the treatment of decision risks associated with measurement uncertainty to generalized linear modelling (GLM). Handling qualitative observations in this way unites information theory, the perceptive identification and choice paradigms of psychophysics. The Rasch invariant measure psychometric GLM approach in particular enables a proper treatment of ordinal data; a clear separation of probe and item attribute estimates; simple expressions for instrument sensitivity; etc. Examples include two aspects of the care of breast cancer patients, from diagnosis to rehabilitation. The Rasch approach leads in turn to opportunities of establishing metrological references for quality assurance of qualitative measurements. In psychometrics, one could imagine a certified reference for knowledge challenge, for example, a particular concept in understanding physics or for product quality of a certain health care service. Multivariate methods, such as Principal Component Regression, can also be improved by exploiting the increased resolution of the Rasch approach.

World wide matching of registration metrology tools of various generations

NASA Astrophysics Data System (ADS)

Laske, F.; Pudnos, A.; Mackey, L.; Tran, P.; Higuchi, M.; Enkrich, C.; Roeth, K.-D.; Schmidt, K.-H.; Adam, D.; Bender, J.

2008-10-01

Turn around time/cycle time is a key success criterion in the semiconductor photomask business. Therefore, global mask suppliers typically allocate work loads based on fab capability and utilization capacity. From a logistical point of view, the manufacturing location of a photomask should be transparent to the customer (mask user). Matching capability of production equipment and especially metrology tools is considered a key enabler to guarantee cross site manufacturing flexibility. Toppan, with manufacturing sites in eight countries worldwide, has an on-going program to match the registration metrology systems of all its production sites. This allows for manufacturing flexibility and risk mitigation.In cooperation with Vistec Semiconductor Systems, Toppan has recently completed a program to match the Vistec LMS IPRO systems at all production sites worldwide. Vistec has developed a new software feature which allows for significantly improved matching of LMS IPRO(x) registration metrology tools of various generations. We will report on the results of the global matching campaign of several of the leading Toppan sites.

New SI-traceable reference gas mixtures for sulfur hexafluoride (SF6) at the pmol/mol level using static and dynamic preparation methods and comparison to existing scales

NASA Astrophysics Data System (ADS)

Wyss, Simon A.; Guillevic, Myriam; Vicar, Martin; Nieuwenkamp, Gerard; Vollmer, Martin K.; Pascale, Céline; Reimann, Stefan; Niederhauser, Bernhard; Emmenegger, Lukas

2017-04-01

We developed two SI-traceable methods, using both static and dynamic preparation steps, to produce reference gas mixtures for sulfur hexafluoride (SF6) in gas cylinders at pmol/mol level. This research activity is conducted under the framework of the European EMRP HIGHGAS project, in support of the high quality measurements of this important greenhouse gas in the earth's atmosphere. In the method used by the Czech Metrology Institute (CMI) a parent mixture of SF6 in synthetic air was produced in an aluminium cylinder at VSL as a first step. This mixture was produced gravimetrically according to ISO 6142 at an amount fraction of 1 μmol/mol. In the second step this primary standard was further diluted to near-ambient amount fraction, with the use of a three-step dilution system and directly pressurised into aluminium cylinders to a pressure of 10 bars. The second method used by the Federal Institute of Metrology (METAS) has already been applied to other fluorinated gases such as HFC-125 and HFC-1234yf. In this method a highly concentrated mixture is produced by spiking a purified synthetic air (matrix gas) with SF6 from a permeation device. The mass loss of SF6 in the permeation device is observed by a magnetic suspension balance. In a second step this mixture is diluted with matrix gas to the desired concentrations. All flows are controlled with mass flow controllers. The diluted gas was transferred into Silconert2000-coated stainless steel cylinders by cryo-filling. The final gas mixtures at near-ambient amount fraction were measured on a Medusa gas chromatography-mass spectrometry system (Medusa-GC/MS) against working standards calibrated on existing scales of the Scripps Institution of Oceanography (SIO) and compared to other scales [1]. The agreement of the assigned values by the CMI and METAS, with the measured values referenced on the SIO scale was excellent. This results show that with this methods we are able to produce accurate SI-traceable gas mixtures at near-ambient amount fraction for SF6, without extensive static dilutions. [1] Benjamin R. Miller, Ray F. Weiss, Peter K. Salameh, Toste Tanhua, Brian R. Greally, Jens Mühle, Peter G. Simmonds, Anal. Chem., 2008, 80, 1536.

Electric field metrology for SI traceability: Systematic measurement uncertainties in electromagnetically induced transparency in atomic vapor

NASA Astrophysics Data System (ADS)

Holloway, Christopher L.; Simons, Matt T.; Gordon, Joshua A.; Dienstfrey, Andrew; Anderson, David A.; Raithel, Georg

2017-06-01

We investigate the relationship between the Rabi frequency (ΩRF, related to the applied electric field) and Autler-Townes (AT) splitting, when performing atom-based radio-frequency (RF) electric (E) field strength measurements using Rydberg states and electromagnetically induced transparency (EIT) in an atomic vapor. The AT splitting satisfies, under certain conditions, a well-defined linear relationship with the applied RF field amplitude. The EIT/AT-based E-field measurement approach derived from these principles is currently being investigated by several groups around the world as a means to develop a new SI-traceable RF E-field measurement technique. We establish conditions under which the measured AT-splitting is an approximately linear function of the RF electric field. A quantitative description of systematic deviations from the linear relationship is key to exploiting EIT/AT-based atomic-vapor spectroscopy for SI-traceable field measurement. We show that the linear relationship is valid and can be used to determine the E-field strength, with minimal error, as long as the EIT linewidth is small compared to the AT-splitting. We also discuss interesting aspects of the thermal dependence (i.e., hot- versus cold-atom) of this EIT-AT technique. An analysis of the transition from cold- to hot-atom EIT in a Doppler-mismatched cascade system reveals a significant change of the dependence of the EIT linewidth on the optical Rabi frequencies and of the AT-splitting on ΩRF.

Improving OCD time to solution using Signal Response Metrology

NASA Astrophysics Data System (ADS)

Fang, Fang; Zhang, Xiaoxiao; Vaid, Alok; Pandev, Stilian; Sanko, Dimitry; Ramanathan, Vidya; Venkataraman, Kartik; Haupt, Ronny

2016-03-01

In recent technology nodes, advanced process and novel integration scheme have challenged the precision limits of conventional metrology; with critical dimensions (CD) of device reduce to sub-nanometer region. Optical metrology has proved its capability to precisely detect intricate details on the complex structures, however, conventional RCWA-based (rigorous coupled wave analysis) scatterometry has the limitations of long time-to-results and lack of flexibility to adapt to wide process variations. Signal Response Metrology (SRM) is a new metrology technique targeted to alleviate the consumption of engineering and computation resources by eliminating geometric/dispersion modeling and spectral simulation from the workflow. This is achieved by directly correlating the spectra acquired from a set of wafers with known process variations encoded. In SPIE 2015, we presented the results of SRM application in lithography metrology and control [1], accomplished the mission of setting up a new measurement recipe of focus/dose monitoring in hours. This work will demonstrate our recent field exploration of SRM implementation in 20nm technology and beyond, including focus metrology for scanner control; post etch geometric profile measurement, and actual device profile metrology.

Miniaturization as a key factor to the development and application of advanced metrology systems

NASA Astrophysics Data System (ADS)

Furlong, Cosme; Dobrev, Ivo; Harrington, Ellery; Hefti, Peter; Khaleghi, Morteza

2012-10-01

Recent technological advances of miniaturization engineering are enabling the realization of components and systems with unprecedented capabilities. Such capabilities, which are significantly beneficial to scientific and engineering applications, are impacting the development and the application of optical metrology systems for investigations under complex boundary, loading, and operating conditions. In this paper, and overview of metrology systems that we are developing is presented. Systems are being developed and applied to high-speed and high-resolution measurements of shape and deformations under actual operating conditions for such applications as sustainability, health, medical diagnosis, security, and urban infrastructure. Systems take advantage of recent developments in light sources and modulators, detectors, microelectromechanical (MEMS) sensors and actuators, kinematic positioners, rapid prototyping fabrication technologies, as well as software engineering.

GCOS reference upper air network (GRUAN): Steps towards assuring future climate records

NASA Astrophysics Data System (ADS)

Thorne, P. W.; Vömel, H.; Bodeker, G.; Sommer, M.; Apituley, A.; Berger, F.; Bojinski, S.; Braathen, G.; Calpini, B.; Demoz, B.; Diamond, H. J.; Dykema, J.; Fassò, A.; Fujiwara, M.; Gardiner, T.; Hurst, D.; Leblanc, T.; Madonna, F.; Merlone, A.; Mikalsen, A.; Miller, C. D.; Reale, T.; Rannat, K.; Richter, C.; Seidel, D. J.; Shiotani, M.; Sisterson, D.; Tan, D. G. H.; Vose, R. S.; Voyles, J.; Wang, J.; Whiteman, D. N.; Williams, S.

2013-09-01

The observational climate record is a cornerstone of our scientific understanding of climate changes and their potential causes. Existing observing networks have been designed largely in support of operational weather forecasting and continue to be run in this mode. Coverage and timeliness are often higher priorities than absolute traceability and accuracy. Changes in instrumentation used in the observing system, as well as in operating procedures, are frequent, rarely adequately documented and their impacts poorly quantified. For monitoring changes in upper-air climate, which is achieved through in-situ soundings and more recently satellites and ground-based remote sensing, the net result has been trend uncertainties as large as, or larger than, the expected emergent signals of climate change. This is more than simply academic with the tropospheric temperature trends issue having been the subject of intense debate, two international assessment reports and several US congressional hearings. For more than a decade the international climate science community has been calling for the instigation of a network of reference quality measurements to reduce uncertainty in our climate monitoring capabilities. This paper provides a brief history of GRUAN developments to date and outlines future plans. Such reference networks can only be achieved and maintained with strong continuing input from the global metrological community.

Improving the Traceability of Meteorological Measurements at Automatic Weather Stations in Thailand

NASA Astrophysics Data System (ADS)

Keawprasert, T.; Sinhaneti, T.; Phuuntharo, P.; Phanakulwijit, S.; Nimsamer, A.

2017-08-01

A joint project between the National Institute of Metrology Thailand (NIMT) and the Thai Meteorology Department (TMD) was established for improving the traceability of meteorology measurements at automatic weather stations (AWSs) in Thailand. The project aimed to improve traceability of air temperature, relative humidity and atmospheric pressure by implementing on-site calibration facilities and developing of new calibration procedures. First, new portable calibration facilities for air temperature, humidity and pressure were set up as working standard of the TMD. A portable humidity calibrator was applied as a uniform and stable source for calibration of thermo-hygrometers. A dew-point hygrometer was employed as reference hygrometer and a platinum resistance thermometer (PRT) traceable to NIMT was used as reference thermometer. The uniformity and stability in both temperature and relative humidity were characterized at NIMT. A transportable pressure calibrator was used for calibration of air pressure sensor. The estimate overall uncertainty of the calibration setup is 0.2 K for air temperature, 1.0 % for relative humidity and 0.2 hPa for atmospheric pressure, respectively. Second, on-site calibration procedures were developed and four AWSs in the central part and the northern of Thailand were chosen as pilot stations for on-site calibration using the new calibration setups and developed calibration procedures. At each station, the calibration was done at the minimum temperature, average temperature and maximum temperature of the year, for air temperature, 20 %, 55 % and 90 % for relative humidity at the average air temperature of that station and at a one-year statistics pressure range for atmospheric pressure at ambient temperature. Additional in-field uncertainty contributions such as the temperature dependence on relative humidity measurement were evaluated and included in the overall uncertainty budget. Preliminary calibration results showed that using a separate PRT probe at these AWSs would be recommended for improving the accuracy of air temperature measurement. In case of relative humidity measurement, the data logger software is needed to be upgraded for achieving higher accuracy of less than 3 %. For atmospheric pressure measurement, a higher accuracy barometer traceable to NIMT could be used to reduce the calibration uncertainty to below 0.2 hPa.

Comparative tests of bench equipment for fuel control system testing of gas-turbine engine

NASA Astrophysics Data System (ADS)

Shendaleva, E. V.

2018-04-01

The relevance of interlaboratory comparative researches is confirmed by attention of world metrological community to this field of activity. Use of the interlaboratory comparative research methodology not only for single gages collation, but also for bench equipment complexes, such as modeling stands for fuel control system testing of gas-turbine engine, is offered. In this case a comparative measure of different bench equipment will be the control fuel pump. Ensuring traceability of measuring result received at test benches of various air enterprises, development and introduction of national standards to practice of bench tests and, eventually, improvement of quality and safety of a aircraft equipment is result of this approach.

Tributyltin--critical pollutant in whole water samples--development of traceable measurement methods for monitoring under the European Water Framework Directive (WFD) 2000/60/EC.

PubMed

Richter, Janine; Fettig, Ina; Philipp, Rosemarie; Jakubowski, Norbert

2015-07-01

Tributyltin is listed as one of the priority substances in the European Water Framework Directive (WFD). Despite its decreasing input in the environment, it is still present and has to be monitored. In the European Metrology Research Programme project ENV08, a sensitive and reliable analytical method according to the WFD was developed to quantify this environmental pollutant at a very low limit of quantification. With the development of such a primary reference method for tributyltin, the project helped to improve the quality and comparability of monitoring data. An overview of project aims and potential analytical tools is given.

Metrology of vibration measurements by laser techniques

NASA Astrophysics Data System (ADS)

von Martens, Hans-Jürgen

2008-06-01

Metrology as the art of careful measurement has been understood as uniform methodology for measurements in natural sciences, covering methods for the consistent assessment of experimental data and a corpus of rules regulating application in technology and in trade and industry. The knowledge, methods and tools available for precision measurements can be exploited for measurements at any level of uncertainty in any field of science and technology. A metrological approach to the preparation, execution and evaluation (including expression of uncertainty) of measurements of translational and rotational motion quantities using laser interferometer methods and techniques will be presented. The realization and dissemination of the SI units of motion quantities (vibration and shock) have been based on laser interferometer methods specified in international documentary standards. New and upgraded ISO standards are reviewed with respect to their suitability for ensuring traceable vibration measurements and calibrations in an extended frequency range of 0.4 Hz to higher than 100 kHz. Using adequate vibration exciters to generate sufficient displacement or velocity amplitudes, the upper frequency limits of the laser interferometer methods specified in ISO 16063-11 for frequencies <= 10 kHz can be expanded to 100 kHz and beyond. A comparison of different methods simultaneously used for vibration measurements at 100 kHz will be demonstrated. A statistical analysis of numerous experimental results proves the highest accuracy achievable currently in vibration measurements by specific laser methods, techniques and procedures (i.e. measurement uncertainty 0.05 % at frequencies <= 10 kHz, <= 1 % up to 100 kHz).

Ultrasound Metrology in Mexico: a round robin test for medical diagnostics

NASA Astrophysics Data System (ADS)

Amezola Luna, R.; López Sánchez, A. L.; Elías Juárez, A. A.

2011-02-01

This paper presents preliminary statistical results from an on-going imaging medical ultrasound study, of particular relevance for gynecology and obstetrics areas. Its scope is twofold, firstly to compile the medical ultrasound infrastructure available in cities of Queretaro-Mexico, and second to promote the use of traceable measurement standards as a key aspect to assure quality of ultrasound examinations performed by medical specialists. The experimental methodology is based on a round robin test using an ultrasound phantom for medical imaging. The physician, using its own ultrasound machine, couplant and facilities, measures the size and depth of a set of pre-defined reflecting and absorbing targets of the reference phantom, which simulate human illnesses. Measurements performed give the medical specialist an objective feedback regarding some performance characteristics of their ultrasound examination systems, such as measurement system accuracy, dead zone, axial resolution, depth of penetration and anechoic targets detection. By the end of March 2010, 66 entities with medical ultrasound facilities, from both public and private institutions, have performed measurements. A network of medical ultrasound calibration laboratories in Mexico, with traceability to The International System of Units via national measurement standards, may indeed contribute to reduce measurement deviations and thus attain better diagnostics.

An Investigation of the Relation Between Contact Thermometry and Dew-Point Temperature Realization

NASA Astrophysics Data System (ADS)

Benyon, R.; Böse, N.; Mitter, H.; Mutter, D.; Vicente, T.

2012-09-01

Precision optical dew-point hygrometers are the most commonly used transfer standards for the comparison of dew-point temperature realizations at National Metrology Institutes (NMIs) and for disseminating traceability to calibration laboratories. These instruments have been shown to be highly reproducible when properly used. In order to obtain the best performance, the resistance of the platinum resistance thermometer (PRT) embedded in the mirror is usually measured with an external, traceable resistance bridge or digital multimeter. The relation between the conventional calibration of miniature PRTs, prior to their assembly in the mirrors of state-of-the-art optical dew-point hygrometers and their subsequent calibration as dew-point temperature measurement devices, has been investigated. Standard humidity generators of three NMIs were used to calibrate hygrometers of different designs, covering the dew-point temperature range from -75 °C to + 95 °C. The results span more than a decade, during which time successive improvements and modifications were implemented by the manufacturer. The findings are presented and discussed in the context of enabling the optimum use of these transfer standards and as a basis for determining contributions to the uncertainty in their calibration.

Towards traceability in CO2 line strength measurements by TDLAS at 2.7 µm

NASA Astrophysics Data System (ADS)

Pogány, Andrea; Ott, Oliver; Werhahn, Olav; Ebert, Volker

2013-11-01

Direct tunable diode laser absorption spectroscopy (TDLAS) was combined in this study with metrological principles on the determination of uncertainties to measure the line strengths of the P36e and P34e line of 12C16O2 in the ν1+ν3 band at 2.7 μm. Special emphasis was put on traceability and a concise, well-documented uncertainty assessment. We have quantitatively analyzed the uncertainty contributions of different experimental parameters to the uncertainty of the line strength. Establishment of the wavenumber axis and the gas handling procedure proved to be the two major contributors to the final uncertainty. The obtained line strengths at 296 K are 1.593×10-20 cm/molecule for the P36e and 1.981×10-20 cm/molecule for the P34e line, with relative expanded uncertainties of 1.1% and 1.3%, respectively (k=2, corresponding to a 95% confidence level). The measured line strength values are in agreement with literature data (line strengths listed in the HITRAN and GEISA databases), but show an uncertainty, which is at least a factor of 2 lower.

Coherent X-ray beam metrology using 2D high-resolution Fresnel-diffraction analysis.

PubMed

Ruiz-Lopez, M; Faenov, A; Pikuz, T; Ozaki, N; Mitrofanov, A; Albertazzi, B; Hartley, N; Matsuoka, T; Ochante, Y; Tange, Y; Yabuuchi, T; Habara, T; Tanaka, K A; Inubushi, Y; Yabashi, M; Nishikino, M; Kawachi, T; Pikuz, S; Ishikawa, T; Kodama, R; Bleiner, D

2017-01-01

Direct metrology of coherent short-wavelength beamlines is important for obtaining operational beam characteristics at the experimental site. However, since beam-time limitation imposes fast metrology procedures, a multi-parametric metrology from as low as a single shot is desirable. Here a two-dimensional (2D) procedure based on high-resolution Fresnel diffraction analysis is discussed and applied, which allowed an efficient and detailed beamline characterization at the SACLA XFEL. So far, the potential of Fresnel diffraction for beamline metrology has not been fully exploited because its high-frequency fringes could be only partly resolved with ordinary pixel-limited detectors. Using the high-spatial-frequency imaging capability of an irradiated LiF crystal, 2D information of the coherence degree, beam divergence and beam quality factor M 2 were retrieved from simple diffraction patterns. The developed beam metrology was validated with a laboratory reference laser, and then successfully applied at a beamline facility, in agreement with the source specifications.

A calibration facility to provide traceable calibration to upper air humidity measuring sensors

NASA Astrophysics Data System (ADS)

Cuccaro, Rugiada; Rosso, Lucia; Smorgon, Denis; Beltramino, Giulio; Fernicola, Vito

2017-04-01

Accurate knowledge and high quality measurement of the upper air humidity and of its profile in atmosphere is essential in many areas of the atmospheric research, for example in weather forecasting, environmental pollution studies and research in meteorology and climatology. Moving from the troposphere to the stratosphere, the water vapour amount varies between some percent to few part per million. For this reason, through the years, several methods and instruments have been developed for the measurement of the humidity in atmosphere. Among the instruments used for atmospheric sounding, radiosondes, airborne and balloon-borne chilled mirror hygrometer (CMH) and tunable diode laser absorption spectrometers (TDLAS) play a key role. To avoid the presence of unknown biases and systematic errors and to obtain accurate and reliable humidity measurements, these instruments need a SI-traceable calibration, preferably carried out in conditions similar to those expected in the field. To satisfy such a need, a new calibration facility has been developed at INRIM. The facility is based on a thermodynamic-based frost-point generator designed to achieve a complete saturation of the carrier gas with a single passage through an isothermal saturator. The humidity generator covers the frost point temperature range between -98 °C and -20 °C and is able to work at any controlled pressure between 200 hPa and 1000 hPa (corresponding to a barometric altitude between ground level and approximately 12000 m). The paper reports the work carried out to test the generator performances, discusses the results and presents the evaluation of the measurement uncertainty. The present work was carried out within the European Joint Research Project "MeteoMet 2 - Metrology for Essential Climate Variables" co-funded by the European Metrology Research Programme (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union.

Validation of Ammonia Diffusive and Active Samplers in a Controlled Atmosphere Test Facility Using Traceable Primary Standard Gas Mixtures

NASA Astrophysics Data System (ADS)

Martin, N. A.; Ferracci, V.; Cassidy, N.; Hook, J.; Battersby, R. M.; Tang, Y. S.; Stevens, A. C. M.; Jones, M. R.; Braban, C. F.; Gates, L.; Hangartner, M.; Sacco, P.; Pagani, D.; Hoffnagle, J.

2016-12-01

Intensive farming, the increased use of fertilizers, and certain industrial processes are believed to be responsible for increases in the amount fraction of ammonia (NH3) found in Europe. NH3 contributes to eutrophication and acidification of land and freshwater, leading to a loss of biodiversity, undesirable changes to the ecosystem, and to secondary particulate matter (PM) formation. Measurements of ambient ammonia over a wide geographical area, are principally carried out with low-cost diffusive samplers or by active sampling with denuders, with each technique delivering time-integrated values over the monitoring period. The goal of this work was to measure the NH3 diffusive sampling rates of five different designs of commercial diffusive samplers (FSM Radiello radial sampler, Gradko diffusion tube, Gradko DIFRAM-400, Passam ammonia sampler, and CEH ALPHA sampler), together with validation tests with a denuder sampler (CEH DELTA denuder). The would deliver validated improvements in the accuracy of ambient measurements of NH3 in the field through the establishment of metrological traceability using new stable ammonia Primary Standard Gas Mixtures (PSMs), developed by gravimetry at NPL. All devices were simultaneously exposed in a controlled atmosphere test facility (CATFAC) containing traceable amount fractions of ammonia applicable to a range of ambient monitoring conditions, with well-defined conditions of temperature, relative humidity and wind speed. Online continuous monitoring of the test atmospheres was carried out with a calibrated cavity ring-down spectrometer modified to account for cross interference by water. Exposed samplers were analysed by individual manufacturers for ammonium using traceable wet chemical techniques. The measured diffusive sampling rates were then applied to field measurements carried out at the Whim Bog experimental station in Scotland, where there is a facility in place for controlled releases of NH3 and also a background site.

Establishment of metrological traceability in porosity measurements by x-ray computed tomography

NASA Astrophysics Data System (ADS)

Hermanek, Petr; Carmignato, Simone

2017-09-01

Internal porosity is an inherent phenomenon to many manufacturing processes, such as casting, additive manufacturing, and others. Since these defects cannot be completely avoided by improving production processes, it is important to have a reliable method to detect and evaluate them accurately. The accurate evaluation becomes even more important concerning current industrial trends to minimize size and weight of products on one side, and enhance their complexity and performance on the other. X-ray computed tomography (CT) has emerged as a promising instrument for holistic porosity measurements offering several advantages over equivalent methods already established in the detection of internal defects. The main shortcomings of the conventional techniques pertain to too general information about total porosity content (e.g. Archimedes method) or the destructive way of testing (e.g. microscopy of cross-sections). On the contrary, CT is a nondestructive technique providing complete information about size, shape and distribution of internal porosity. However, due to the lack of international standards and the fact that it is relatively a new measurement technique, CT as a measurement technology has not yet reached maturity. This study proposes a procedure for the establishment of measurement traceability in porosity measurements by CT including the necessary evaluation of measurement uncertainty. The traceability transfer is carried out through a novel reference standard calibrated by optical and tactile coordinate measuring systems. The measurement uncertainty is calculated following international standards and guidelines. In addition, the accuracy of porosity measurements by CT with the associated measurement uncertainty is evaluated using the reference standard.

A Toolbox of Metrology-Based Techniques for Optical System Alignment

NASA Technical Reports Server (NTRS)

Coulter, Phillip; Ohl, Raymond G.; Blake, Peter N.; Bos, Brent J.; Casto, Gordon V.; Eichhorn, William L.; Gum, Jeffrey S.; Hadjimichael, Theodore J.; Hagopian, John G.; Hayden, Joseph E.;

A Toolbox of Metrology-Based Techniques for Optical System Alignment

NASA Technical Reports Server (NTRS)

Coulter, Phillip; Ohl, Raymond G.; Blake, Peter N.; Bos, Brent J.; Eichhorn, William L.; Gum, Jeffrey S.; Hadjimichael, Theodore J.; Hagopian, John G.; Hayden, Joseph E.; Hetherington, Samuel E.;

Noise evaluation of a point autofocus surface topography measuring instrument

NASA Astrophysics Data System (ADS)

Maculotti, Giacomo; Feng, Xiaobing; Galetto, Maurizio; Leach, Richard

2018-06-01

In this work, the measurement noise of a point autofocus surface topography measuring instrument is evaluated, as the first step towards establishing a route to traceability for this type of instrument. The evaluation is based on the determination of the metrological characteristics for noise as outlined in draft ISO specification standards by using a calibrated optical flat. The static noise and repeatability of the autofocus sensor are evaluated. The influence of environmental disturbances on the measured surface topography and the built-in software to compensate for such influences are also investigated. The instrument was found to have a measurement noise of approximately 2 nm or, when expressed with the measurement bandwidth, 0.4 nm for a single-point measurement.

Rapid and accurate assessment of the activity measurements in Brazilian hospitals and clinics.

PubMed

de Oliveira, A E; Iwahara, A; da Cruz, P A L; da Silva, C J; de Araújo, E B; Mengatti, J; da Silva, R L; Trindade, O L

2018-04-01

Traceability in Nuclear Medicine Service (NMS) measurements was checked by the Institute of Radioprotection and Dosimetry (IRD) through the Institute of Energy and Nuclear Research (IPEN). In 2016, IRD ran an intercomparison program and invited Brazilian NMS authorized to administer 131 I to patients. Sources of 131 I were distributed to 33 NMSs. Three other sources from the same solution were sent to IRD, after measurement at IPEN. These sources were calibrated in the IRD reference system. A correction factor of 1.013 was obtained. Ninety percent of the NMS comparisons results are within ±10% of the National Laboratory of Metrology of Ionizing Radiation (LNMRI) value, the Brazilian legal requirement. Copyright © 2017 Elsevier Ltd. All rights reserved.

MetNH3: Metrology for ammonia in ambient air

NASA Astrophysics Data System (ADS)

Braban, Christine; Twigg, Marsailidh; Tang, Sim; Leuenberger, Daiana; Ferracci, Valerio; Martin, Nick; Pascale, Celine; Hieta, Tuomas; Pogany, Andrea; Persijn, Stefan; van Wijk, Janneke; Gerwig, Holger; Wirtze, Klaus; Tiebe, Carlo; Balslev-Harder, David; Niederhausen, Bernhardt

2015-04-01

Measuring ammonia in ambient air is a sensitive and priority issue due to its harmful effects on human health and ecosystems. The European Directive 2001/81/EC on 'National Emission Ceilings for Certain Atmospheric Pollutants (NEC)' regulates ammonia emissions in the member states. However, there is a lack of regulation to ensure reliable ammonia measurements namely in applicable analytical technology, maximum allowed uncertainty, quality assurance and quality control (QC/QA) procedures as well as in the infrastructure to attain metrological traceability. Validated ammonia measurement data of high quality from air monitoring networks are vitally important for identifying changes due to implementations of environment policies, for understanding where the uncertainties in current emission inventories are derived from and for providing independent verification of atmospheric model predictions. The new EURAMET project MetNH3 aims to develop improved reference gas mixtures by static and dynamic gravimetric generation methods, develop and characterise laser based optical spectrometric standards and establish the transfer from high-accuracy standards to field applicable methods. MetNH3started in June 2014 and in this presentation the first results from the metrological characterisation of a commercially available cavity ring-down spectrometer (CRDS) will be discussed. Also first tests and results from a new design, Controlled Atmosphere Test Facility (CATFAC), which is to be characterised and used to validate the performance of diffusive samplers, denuders and on-line instruments, will be reported. CAFTEC can be used to control test parameters such as ammonia concentration, relative humidity and wind speed. Outline plans for international laboratory and field intercomparisons in 2016 will be presented.

Applications of surface metrology in firearm identification

NASA Astrophysics Data System (ADS)

Zheng, X.; Soons, J.; Vorburger, T. V.; Song, J.; Renegar, T.; Thompson, R.

2014-01-01

Surface metrology is commonly used to characterize functional engineering surfaces. The technologies developed offer opportunities to improve forensic toolmark identification. Toolmarks are created when a hard surface, the tool, comes into contact with a softer surface and causes plastic deformation. Toolmarks are commonly found on fired bullets and cartridge cases. Trained firearms examiners use these toolmarks to link an evidence bullet or cartridge case to a specific firearm, which can lead to a criminal conviction. Currently, identification is typically based on qualitative visual comparison by a trained examiner using a comparison microscope. In 2009, a report by the National Academies called this method into question. Amongst other issues, they questioned the objectivity of visual toolmark identification by firearms examiners. The National Academies recommended the development of objective toolmark identification criteria and confidence limits. The National Institute of Standards and Technology (NIST) have applied its experience in surface metrology to develop objective identification criteria, measurement methods, and reference artefacts for toolmark identification. NIST developed the Standard Reference Material SRM 2460 standard bullet and SRM 2461 standard cartridge case to facilitate quality control and traceability of identifications performed in crime laboratories. Objectivity is improved through measurement of surface topography and application of unambiguous surface similarity metrics, such as the maximum value (ACCFMAX) of the areal cross correlation function. Case studies were performed on consecutively manufactured tools, such as gun barrels and breech faces, to demonstrate that, even in this worst case scenario, all the tested tools imparted unique surface topographies that were identifiable. These studies provide scientific support for toolmark evidence admissibility in criminal court cases.

The Development of a Deflectometer for Accurate Surface Figure Metrology

NASA Technical Reports Server (NTRS)

Gubarev, Mikhail; Eberhardt, Andrew; Ramsey, Brian; Atkins, Carolyn

2015-01-01

Marshall Space Flight Center is developing the method of direct fabrication for high resolution full-shell x-ray optics. In this technique the x-ray optics axial profiles are figured and polished using a computer-controlled ZeekoIRP600X polishing machine. Based on the Chandra optics fabrication history about one third of the manufacturing time is spent on moving a mirror between fabrication and metrology sites, reinstallation and alignment with either the metrology or fabrication instruments. Also, the accuracy of the alignment significantly affects the ultimate accuracy of the resulting mirrors. In order to achieve higher convergence rate it is highly desirable to have a metrology technique capable of in situ surface figure measurements of the optics under fabrication, so the overall fabrication costs would be greatly reduced while removing the surface errors due to the re-alignment necessary after each metrology cycle during the fabrication. The goal of this feasibility study is to demonstrate if the Phase Measuring Deflectometry can be applied for in situ metrology of full shell x-ray optics. Examples of the full-shell mirror substrates suitable for the direct fabrication

Theoferometer for the Construction of Precision Optomechanical Assemblies

NASA Technical Reports Server (NTRS)

Korzun, Ashley M.

2006-01-01

The increasing difficulty of metrology requirements on projects involving optics and the alignment of instrumentation on spacecraft has reached a turning point. Requirements as low as 0.1 arcseconds for the static, rotational alignment of components within a coordinate system cannot be met with a theodolite, the alignment tool currently in use. A "theoferometer" is an interferometer mounted on a rotation stage with degrees of freedom in azimuth and elevation for metrology and alignment applications. The success of a prototype theoferometer in approaching these metrology requirements led to a redesign stressing mechanical, optical, and software changes to increase the sensitivity and portability of the unit. This paper covers the improvements made to the first prototype theoferometer, characteristic testing, and demonstration of the redesigned theoferometer s capabilities as a "theodolite replacement" and low-uncertainty metrology tool.

Subaperture metrology technologies extend capabilities in optics manufacturing

NASA Astrophysics Data System (ADS)

Tricard, Marc; Forbes, Greg; Murphy, Paul

2005-10-01

Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of higher precision optics with increasingly difficult figure requirements. However, metrology is a critical piece of the optics fabrication process, and the dependence on interferometry is especially acute for computer-controlled, deterministic finishing. Without accurate full-aperture metrology, figure correction using subaperture polishing technologies would not be possible. QED Technologies has developed the Subaperture Stitching Interferometer (SSI) that extends the effective aperture and dynamic range of a phase measuring interferometer. The SSI's novel developments in software and hardware improve the capacity and accuracy of traditional interferometers, overcoming many of the limitations previously faced. The SSI performs high-accuracy automated measurements of spheres, flats, and mild aspheres up to 200 mm in diameter by stitching subaperture data. The system combines a six-axis precision workstation, a commercial Fizeau interferometer of 4" or 6" aperture, and dedicated software. QED's software automates the measurement design, data acquisition, and mathematical reconstruction of the full-aperture phase map. The stitching algorithm incorporates a general framework for compensating several types of errors introduced by the interferometer and stage mechanics. These include positioning errors, viewing system distortion, the system reference wave error, etc. The SSI has been proven to deliver the accurate and flexible metrology that is vital to precision optics fabrication. This paper will briefly review the capabilities of the SSI as a production-ready, metrology system that enables costeffective manufacturing of precision optical surfaces.

Stability of gravimetrically prepared ammonia in nitrogen standards at 10 and 100 µmolmol-1

NASA Astrophysics Data System (ADS)

Amico di Meane, Elena; Ferracci, Valerio; Martin, Nicholas A.; Brewer, Paul J.; Worton, David R.

2017-04-01

Ammonia (NH3) is a well-known ambient pollutant which plays a key role in both atmospheric chemistry and biogeochemical processes occurring in a variety of ecosystems. Ammonia is emitted from intensive animal farming and certain industrial processes: once in the atmosphere, it contributes to the increasing ambient levels of particulate matter observed across Europe. As legislation is being implemented to curb ammonia emissions, it is crucial to achieve metrological traceability for ammonia measurements in ambient air to allow comparability of field measurements, ensure accuracy of emissions inventories and verify the effectiveness of emission ceiling policies. The development of stable and traceable gas standards for instrument calibration underpins all of the above. To address this requirement, a stability study on gravimetrically-prepared high-pressure ammonia mixtures in nitrogen was carried out for two years for two different cylinder types at two different concentrations: 10 and 100 ppm. New standards were prepared gravimetrically every three to six months for comparison to determine any variations due to instability. In the first type of cylinders ammonia appears stable at 100 ppm but shows degradation of about 2% at 10 ppm over the timescale of the stability study; on the other hand, the second type of cylinders exhibits good stability already at the 10 ppm level.

Development of a primary standard for dynamic pressure based on drop weight method covering a range of 10 MPa-400 MPa

NASA Astrophysics Data System (ADS)

Salminen, J.; Högström, R.; Saxholm, S.; Lakka, A.; Riski, K.; Heinonen, M.

2018-04-01

In this paper we present the development of a primary standard for dynamic pressures that is based on the drop weight method. At the moment dynamic pressure transducers are typically calibrated using reference transducers, which are calibrated against static pressure standards. Because dynamic and static characteristics of pressure transducers may significantly differ from each other, it is important that these transducers are calibrated against dynamic pressure standards. In a method developed in VTT Technical Research Centre of Finland Ltd, Centre for Metrology MIKES, a pressure pulse is generated by impact between a dropping weight and a piston of a liquid-filled piston-cylinder assembly. The traceability to SI-units is realized through interferometric measurement of the acceleration of the dropping weight during impact, the effective area of the piston-cylinder assembly and the mass of the weight. Based on experimental validation and an uncertainty evaluation, the developed primary standard provides traceability for peak pressures in the range from 10 MPa to 400 MPa with a few millisecond pulse width and a typical relative expanded uncertainty (k  =  2) of 1.5%. The performance of the primary standard is demonstrated by test calibrations of two dynamic pressure transducers.

Practical Quantum Realization of the Ampere from the Elementary Charge

NASA Astrophysics Data System (ADS)

Brun-Picard, J.; Djordjevic, S.; Leprat, D.; Schopfer, F.; Poirier, W.

2016-10-01

One major change of the future revision of the International System of Units is a new definition of the ampere based on the elementary charge e . Replacing the former definition based on Ampère's force law will allow one to fully benefit from quantum physics to realize the ampere. However, a quantum realization of the ampere from e , accurate to within 10-8 in relative value and fulfilling traceability needs, is still missing despite the many efforts made for the development of single-electron tunneling devices. Starting again with Ohm's law, applied here in a quantum circuit combining the quantum Hall resistance and Josephson voltage standards with a superconducting cryogenic amplifier, we report on a practical and universal programmable quantum current generator. We demonstrate that currents generated in the milliampere range are accurately quantized in terms of e fJ (fJ is the Josephson frequency) with measurement uncertainty of 10-8. This new quantum current source, which is able to deliver such accurate currents down to the microampere range, can greatly improve the current measurement traceability, as demonstrated with the calibrations of digital ammeters. In addition, it opens the way to further developments in metrology and in fundamental physics, such as a quantum multimeter or new accurate comparisons to single-electron pumps.

Performance of ASML YieldStar μDBO overlay targets for advanced lithography nodes C028 and C014 overlay process control

NASA Astrophysics Data System (ADS)

Blancquaert, Yoann; Dezauzier, Christophe; Depre, Jerome; Miqyass, Mohamed; Beltman, Jan

2013-04-01

Continued tightening of overlay control budget in semiconductor lithography drives the need for improved metrology capabilities. Aggressive improvements are needed for overlay metrology speed, accuracy and precision. This paper is dealing with the on product metrology results of a scatterometry based platform showing excellent production results on resolution, precision, and tool matching for overlay. We will demonstrate point to point matching between tool generations as well as between target sizes and types. Nowadays, for the advanced process nodes a lot of information is needed (Higher order process correction, Reticle fingerprint, wafer edge effects) to quantify process overlay. For that purpose various overlay sampling schemes are evaluated: ultra- dense, dense and production type. We will show DBO results from multiple target type and shape for on product overlay control for current and future node down to at least 14 nm node. As overlay requirements drive metrology needs, we will evaluate if the new metrology platform meets the overlay requirements.

Investigation into the use of smartphone as a machine vision device for engineering metrology and flaw detection, with focus on drilling

NASA Astrophysics Data System (ADS)

Razdan, Vikram; Bateman, Richard

2015-05-01

This study investigates the use of a Smartphone and its camera vision capabilities in Engineering metrology and flaw detection, with a view to develop a low cost alternative to Machine vision systems which are out of range for small scale manufacturers. A Smartphone has to provide a similar level of accuracy as Machine Vision devices like Smart cameras. The objective set out was to develop an App on an Android Smartphone, incorporating advanced Computer vision algorithms written in java code. The App could then be used for recording measurements of Twist Drill bits and hole geometry, and analysing the results for accuracy. A detailed literature review was carried out for in-depth study of Machine vision systems and their capabilities, including a comparison between the HTC One X Android Smartphone and the Teledyne Dalsa BOA Smart camera. A review of the existing metrology Apps in the market was also undertaken. In addition, the drilling operation was evaluated to establish key measurement parameters of a twist Drill bit, especially flank wear and diameter. The methodology covers software development of the Android App, including the use of image processing algorithms like Gaussian Blur, Sobel and Canny available from OpenCV software library, as well as designing and developing the experimental set-up for carrying out the measurements. The results obtained from the experimental set-up were analysed for geometry of Twist Drill bits and holes, including diametrical measurements and flaw detection. The results show that Smartphones like the HTC One X have the processing power and the camera capability to carry out metrological tasks, although dimensional accuracy achievable from the Smartphone App is below the level provided by Machine vision devices like Smart cameras. A Smartphone with mechanical attachments, capable of image processing and having a reasonable level of accuracy in dimensional measurement, has the potential to become a handy low-cost Machine vision system for small scale manufacturers, especially in field metrology and flaw detection.

Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yashchuk, Valeriy V; Barber, Samuel; Domning, Edward E.

2009-09-11

A new low budget slope measuring instrument, the Developmental Long Trace Profiler (DLTP), was recently brought to operation at the ALS Optical Metrology Laboratory. The design, instrumental control and data acquisition system, initial alignment and calibration procedures, as well as the developed experimental precautions and procedures are described in detail. The capability of the DLTP to achieve sub-microradian surface slope metrology is verified via cross-comparison measurements with other high performance slope measuring instruments when measuring the same high quality test optics. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.

Influence of the air’s refractive index on precision angle metrology with autocollimators

NASA Astrophysics Data System (ADS)

Geckeler, Ralf D.; Křen, Petr; Just, Andreas; Schumann, Matthias; Krause, Michael

2018-07-01

In this paper, we discuss a substantial—though previously neglected—error source in precision metrology with autocollimators, specifically, changes in the air’s refractive index, with a focus on the dominant impact of pressure changes. Pressure decreases with increasing elevation above sea level and is subject to substantial variation due to weather changes. It causes changes in an autocollimator’s angle response which are proportional to the measured angle and which increase linearly with the beam length and air pressure. We characterise this important influence in detail by using extended theoretical and experimental investigations and derive strategies for correcting it. We discuss its implications for the comparison of autocollimator calibrations performed at different metrology institutes which is crucial for validating their calibration capabilities. This work aims at approaching fundamental limits in angle metrology with autocollimators.

Optical characterisation of three reference Dobsons in the ATMOZ Project - verification of G. M. B. Dobson's original specifications

NASA Astrophysics Data System (ADS)

Köhler, Ulf; Nevas, Saulius; McConville, Glen; Evans, Robert; Smid, Marek; Stanek, Martin; Redondas, Alberto; Schönenborn, Fritz

2018-04-01

Three reference Dobsons (regional standard Dobsons No. 064, Germany and No. 074, Czech Republic as well as the world standard No. 083, USA) were optically characterized at the Physikalisch-Technische Bundesanstalt (PTB) in Braunschweig in 2015 and at the Czech Metrology Institute (CMI) in Prague in 2016 within the EMRP ENV 059 project Traceability for atmospheric total column ozone. Slit functions and the related parameters of the instruments were measured and compared with G. M. B. Dobson's specifications in his handbook. All Dobsons show a predominantly good match of the slit functions and the peak (centroid) wavelengths with deviations between -0.11 and +0.12 nm and differences of the full width half maximum (FWHM) between 0.13 and 0.37 nm compared to the nominal values at the shorter wavelengths. Slightly larger deviations of the FWHMs from the nominal Dobson data, up to 1.22 nm, can be seen at the longer wavelengths, especially for the slit function of the long D-wavelength. However, differences between the effective absorption coefficients (EACs) for ozone derived using Dobson's nominal values of the optical parameters on one hand and these measured values on the other hand are not too large in the case of both old Bass-Paur (BP) and new IUP-ozone (Institut für Umweltphysik, University of Bremen) absorption cross sections. Their inclusion in the calculation of the total ozone column (TOC) leads to improvements of significantly less than ±1 % at the AD-wavelengths between -1 and -2 % at the CD-wavelengths pairs in the BP-scale. The effect on the TOC in the IUP-scale is somewhat larger at the AD-wavelengths, up to +1 % (D074), and smaller at the CD-wavelengths pair, from -0.44 to -1.5 %. Beside this positive effect gained from the data with higher metrological quality that is needed for trend analyses and satellite validation, it will be also possible to explain uncommon behaviours of field Dobsons during calibration services, especially when a newly developed transportable device TuPS (tuneable portable radiation source) from CMI proves its capability to provide similar results as the stationary setups in the laboratories of National Metrology Institutes. Then, the field Dobsons can be optically characterized as well during regular calibration campaigns. A corresponding publication will be prepared using the results of TuPS-based measurements of more than 10 Dobsons in field campaigns in 2017.

Using the Leitz LMS 2000 for monitoring and improvement of an e-beam

NASA Astrophysics Data System (ADS)

Blaesing-Bangert, Carola; Roeth, Klaus-Dieter; Ogawa, Yoichi

1994-11-01

Kaizen--a continuously improving--is a philosophy lived in Japan which is also becoming more and more important in Western companies. To implement this philosophy in the semiconductor industry, a high performance metrology tool is essential to determine the status of production quality periodically. An important prerequisite for statistical process control is the high stability of the metrology tool over several months or years; the tool-induced shift should be as small as possible. The pattern placement metrology tool Leitz LMS 2000 has been used in a major European mask house for several years now to qualify masks within the tightest specifications and to monitor the MEBES III and its cassettes. The mask shop's internal specification for the long term repeatability of the pattern placement metrology tool is 19 nm instead of 42 nm as specified by the supplier of the tool. Then the process capability of the LMS 2000 over 18 months is represented by an average cpk value of 2.8 for orthogonality, 5.2 for x-scaling, and 3.0 for y-scaling. The process capability of the MEBES III and its cassettes was improved in the past years. For instance, 100% of the masks produced with a process tolerance of +/- 200 nm are now within this limit.

Development of metrology for freeform optics in reflection mode

NASA Astrophysics Data System (ADS)

Burada, Dali R.; Pant, Kamal K.; Mishra, Vinod; Bichra, Mohamed; Khan, Gufran S.; Sinzinger, Stefan; Shakher, Chandra

2017-06-01

The increased range of manufacturable freeform surfaces offered by the new fabrication techniques is giving opportunities to incorporate them in the optical systems. However, the success of these fabrication techniques depends on the capabilities of metrology procedures and a feedback mechanism to CNC machines for optimizing the manufacturing process. Therefore, a precise and in-situ metrology technique for freeform optics is in demand. Though all the techniques available for aspheres have been extended for the freeform surfaces by the researchers, but none of the techniques has yet been incorporated into the manufacturing machine for in-situ measurement. The most obvious reason is the complexity involved in the optical setups to be integrated in the manufacturing platforms. The Shack-Hartmann sensor offers the potential to be incorporated into the machine environment due to its vibration insensitivity, compactness and 3D shape measurement capability from slope data. In the present work, a measurement scheme is reported in which a scanning Shack-Hartmann Sensor has been employed and used as a metrology tool for measurement of freeform surface in reflection mode. Simulation studies are conducted for analyzing the stitching accuracy in presence of various misalignment errors. The proposed scheme is experimentally verified on a freeform surface of cubic phase profile.

Bilateral comparison on the calibration of a set of F1 mass standards between IBMETRO (Bolivia) and INTI (Argentina)

NASA Astrophysics Data System (ADS)

Quille, Ruben; Sanchez, Jorge; Escalante, Boris

2017-01-01

Mass calibration is an important activity for National Metrology Institutes (NMIs), due to the amount of measurements on scientific, industrial and legal activities that have traceability to the national mass standards of each country. In order to evaluate the stated uncertainty and degree of equivalence between INTI-Argentina and IBMETRO-Bolivia on mass calibration a bilateral comparison was agreed between both laboratories. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCM, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

Reducing the overlay metrology sensitivity to perturbations of the measurement stack

NASA Astrophysics Data System (ADS)

Zhou, Yue; Park, DeNeil; Gutjahr, Karsten; Gottipati, Abhishek; Vuong, Tam; Bae, Sung Yong; Stokes, Nicholas; Jiang, Aiqin; Hsu, Po Ya; O'Mahony, Mark; Donini, Andrea; Visser, Bart; de Ruiter, Chris; Grzela, Grzegorz; van der Laan, Hans; Jak, Martin; Izikson, Pavel; Morgan, Stephen

2017-03-01

Overlay metrology setup today faces a continuously changing landscape of process steps. During Diffraction Based Overlay (DBO) metrology setup, many different metrology target designs are evaluated in order to cover the full process window. The standard method for overlay metrology setup consists of single-wafer optimization in which the performance of all available metrology targets is evaluated. Without the availability of external reference data or multiwafer measurements it is hard to predict the metrology accuracy and robustness against process variations which naturally occur from wafer-to-wafer and lot-to-lot. In this paper, the capabilities of the Holistic Metrology Qualification (HMQ) setup flow are outlined, in particular with respect to overlay metrology accuracy and process robustness. The significance of robustness and its impact on overlay measurements is discussed using multiple examples. Measurement differences caused by slight stack variations across the target area, called grating imbalance, are shown to cause significant errors in the overlay calculation in case the recipe and target have not been selected properly. To this point, an overlay sensitivity check on perturbations of the measurement stack is presented for improvement of the overlay metrology setup flow. An extensive analysis on Key Performance Indicators (KPIs) from HMQ recipe optimization is performed on µDBO measurements of product wafers. The key parameters describing the sensitivity to perturbations of the measurement stack are based on an intra-target analysis. Using advanced image analysis, which is only possible for image plane detection of μDBO instead of pupil plane detection of DBO, the process robustness performance of a recipe can be determined. Intra-target analysis can be applied for a wide range of applications, independent of layers and devices.

Assuring measurement quality in person-centred healthcare

NASA Astrophysics Data System (ADS)

Pendrill, L. R.

2018-03-01

Is it realistic to aspire to the same kind of quality-assurance of measurement in person-centred care, currently being implemented in healthcare globally, as is established in the physical sciences and engineering? Ensuring metrological comparability (‘traceability’) and reliably declaring measurement uncertainty when assessing patient ability or increased social capital are however challenging for subjective measurements often characterised by large dispersion. Drawing simple analogies between ‘instruments’ in the social sciences—questionnaires, ability tests, etc—and engineering instruments such as thermometers does not go far enough. A possible way forward, apparently equally applicable to both physical and social measurement, seems to be to model inferences in terms of performance metrics of a measurement system. Person-centred care needs person-centred measurement and a full picture of the measurement process when man acts as a measurement instrument is given in the present paper. This complements previous work by presenting the process, step by step, from the observed indication (e.g. probability of success, P success, of achieving a task), through restitution with Rasch measurement theory, to the measurand (e.g. task difficulty). Rasch invariant measure theory can yield quantities—‘latent’ (or ‘explanatory’) variables such as task challenge or person ability—with characteristics akin to those of physical quantities. Metrological references for comparability via traceability and reliable estimates of uncertainty and decision risks are then in reach even for perceptive measurements (and other qualitative properties). As a case study, the person-centred measurement of cognitive ability is examined, as part of the EU project EMPIR 15HLT04 NeuroMet, for Alzheimer’s, where better analysis of correlations with brain atrophy is enabled thanks to the Rasch metrological approach.

Analysis of key technologies for virtual instruments metrology

NASA Astrophysics Data System (ADS)

Liu, Guixiong; Xu, Qingui; Gao, Furong; Guan, Qiuju; Fang, Qiang

2008-12-01

Virtual instruments (VIs) require metrological verification when applied as measuring instruments. Owing to the software-centered architecture, metrological evaluation of VIs includes two aspects: measurement functions and software characteristics. Complexity of software imposes difficulties on metrological testing of VIs. Key approaches and technologies for metrology evaluation of virtual instruments are investigated and analyzed in this paper. The principal issue is evaluation of measurement uncertainty. The nature and regularity of measurement uncertainty caused by software and algorithms can be evaluated by modeling, simulation, analysis, testing and statistics with support of powerful computing capability of PC. Another concern is evaluation of software features like correctness, reliability, stability, security and real-time of VIs. Technologies from software engineering, software testing and computer security domain can be used for these purposes. For example, a variety of black-box testing, white-box testing and modeling approaches can be used to evaluate the reliability of modules, components, applications and the whole VI software. The security of a VI can be assessed by methods like vulnerability scanning and penetration analysis. In order to facilitate metrology institutions to perform metrological verification of VIs efficiently, an automatic metrological tool for the above validation is essential. Based on technologies of numerical simulation, software testing and system benchmarking, a framework for the automatic tool is proposed in this paper. Investigation on implementation of existing automatic tools that perform calculation of measurement uncertainty, software testing and security assessment demonstrates the feasibility of the automatic framework advanced.

Validation of ammonia diffusive and active samplers in a controlled atmosphere test facility using traceable Primary Standard Gas Mixtures

NASA Astrophysics Data System (ADS)

Martin, Nicholas A.; Ferracci, Valerio; Cassidy, Nathan; Hook, Josh; Battersby, Ross M.; Tang, Yuk S.; Stevens, Amy C. M.; Jones, Matthew R.; Braban, Christine F.; Gates, Linda; Hangartner, Markus; Stoll, Jean-Marc; Sacco, Paolo; Pagani, Diego; Hoffnagle, John A.

2017-04-01

Intensive animal farming, the increased use of fertilizers, and certain industrial processes are believed to be responsible for the observed increases in the amount fraction of ammonia (NH3) found in Europe. NH3 contributes to eutrophication and acidification of land and freshwater, potentially leading to a loss of biodiversity and undesirable changes to the ecosystem. It also contributes to the formation of secondary particulate matter (PM) formation, which is associated with poor air quality and adverse health outcomes. Measurements of ambient ammonia are principally carried out with low-cost diffusive samplers or by active sampling with denuders, with each method delivering time-integrated values over the monitoring period. However, such techniques have not yet been extensively validated. The goal of this work was to provide improvements in the metrological traceability through the determination of NH3 diffusive sampling rates. Five different designs of commercial diffusive samplers (FSM Radiello radial sampler, Gradko diffusion tube, Gradko DIFRAM-400, Passam ammonia sampler, and CEH ALPHA sampler) were employed, together with a pumped denuder sampler (CEH DELTA denuder) for comparison. All devices were simultaneously exposed for either 28 days or 14 days (dependent on sampler type) in a controlled atmosphere test facility (CATFAC) containing traceable amount fractions of humidified ammonia using new stable ammonia Primary Standard Gas Mixtures developed by gravimetry at NPL, under a wide range of conditions that are relevant to ambient monitoring. Online continuous monitoring of the ammonia test atmospheres was carried out by extractive sampling, employing a calibrated cavity ring-down spectrometer, which had been modified to account for cross interference by water vapour. Each manufacturer extracted the captured ammonia on the exposed samplers in the form of ammonium (NH4+) using their own accredited traceable wet chemical techniques, and then reported data based on their historical diffusive sampling rates. There was considerable variation in the results, which demonstrated the need for such validation work to be carried out. We report new measurements of the NH3 sampling rates determined in the CATFAC, which can be applied to improve the reliability of measurements in the field.

Traceable X,Y self-calibration at single nm level of an optical microscope used for coherence scanning interferometry

NASA Astrophysics Data System (ADS)

Ekberg, Peter; Mattsson, Lars

2018-03-01

Coherence scanning interferometry used in optical profilers are typically good for Z-calibration at nm-levels, but the X,Y accuracy is often left without further notice than typical resolution limits of the optics, i.e. of the order of ~1 µm. For the calibration of metrology tools we rely on traceable artefacts, e.g. gauge blocks for traditional coordinate measurement machines, and lithographically mask made artefacts for microscope calibrations. In situations where the repeatability and accuracy of the measurement tool is much better than the uncertainty of the traceable artefact, we are bound to specify the uncertainty based on the calibration artefact rather than on the measurement tool. This is a big drawback as the specified uncertainty of a calibrated measurement may shrink the available manufacturing tolerance. To improve the uncertainty in X,Y we can use self-calibration. Then, we do not need to know anything more than that the artefact contains a pattern with some nominal grid. This also gives the opportunity to manufacture the artefact in-house, rather than buying a calibrated and expensive artefact. The self-calibration approach we present here is based on an iteration algorithm, rather than the traditional mathematical inversion, and it leads to much more relaxed constrains on the input measurements. In this paper we show how the X,Y errors, primarily optical distortions, within the field of view (FOV) of an optical coherence scanning interferometry microscope, can be reduced with a large factor. By self-calibration we achieve an X,Y consistency in the 175  ×  175 µm2 FOV of ~2.3 nm (1σ) using the 50×  objective. Besides the calibrated coordinate X,Y system of the microscope we also receive, as a bonus, the absolute positions of the pattern in the artefact with a combined uncertainty of 6 nm (1σ) by relying on a traceable 1D linear measurement of a twin artefact at NIST.

Airborne hygrometer calibration inter-comparison against a metrological water vapour standard

NASA Astrophysics Data System (ADS)

Smorgon, Denis; Boese, Norbert; Ebert, Volker

2014-05-01

Water vapour is the most important atmospheric greenhouse gas, which causes a major feedback to warming and other changes in the climate system. Knowledge of the distribution of water vapour and its climate induced changes is especially important in the upper troposphere and lower stratosphere (UT/LS) where vapour plays a critical role in atmospheric radiative balance, cirrus cloud formation, and photochemistry. But, our understanding of water in the UT/LS is limited by significant uncertainties in current UT/LS water measurements. One of the most comprehensive inter-comparison campaigns for airborne hygrometers, termed AQUAVIT (AV1) [1], took place in 2007 at the AIDA chamber at the Karlsruhe Institute of Technology (KIT) in Germany. AV1 was a well-defined, referred, blind inter-comparison of 22 airborne field instruments from 17 international research groups. One major metrological deficit of AV1, however, was, that no traceable reference instrument participated in the inter-comparison experiments and that the calibration procedures of the participating instruments were not monitored or interrogated. Consequently a follow-up inter-comparison was organized in April 2013, which for the first time also provides a traceable link to the international humidity scale. This AQUAVIT2 (AV2) campaign (details see: http://www.imk-aaf.kit.edu/aquavit/index.php/Main_Page) was again located at KIT/AIDA and organised by an international organizing committee including KIT, PTB, FZJ and others. Generally AV2 is divided in two parallel comparisons: 1) AV2-A uses the AIDA chamber for a simultaneous comparison of all instruments (incl. sampling and in-situ instruments) over a broad range of conditions characteristic for the UT/LS; 2) AV2-B, about which this paper is reporting, is a sequential comparison of selected hygrometers and (when possible) their reference calibration infrastructures by means of a chilled mirror hygrometer traced back to the primary National humidity standard of PTB and a validated, two-pressure generator acting as a highly stable and reproducible source of water vapour. The aim of AV2-B was to perform an absolute, metrological comparison of the field instruments/calibration infrastructures to the metrological humidity scale, and to collect essential information about methods and procedures used by the atmospheric community for instrument calibration and validation, in order to investigate e.g. the necessity and possible comparability advantage by a standardized calibration procedure. The work will give an overview over the concept of the AV2-B inter-comparison, the various general measurement and calibration principles, and discuss the outcome and consequences of the comparison effort. The AQUAVIT effort is linked to the EMRP project METEOMET (ENV07) and partially supported by the EMRP and ENV07. The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. [1] H. Saathoff, C. Schiller, V. Ebert, D. W. Fahey, R.-S. Gao, O. Möhler, and the aquavit team, The AQUAVIT formal intercomparison of atmospheric water measurement methods, 5th General Assembly of the European Geosciences Union, 13-18 April 2008, Vienna, Austria Keywords: humidity, water vapour, inter-comparison, airborne instruments.

CONFERENCE NOTE: CETO—Centro de Ciências e Tecnologias Opticas, Trends in Optical Fibre Metrology and Standards

NASA Astrophysics Data System (ADS)

1994-01-01

Summer School, 27 June to 8 July 1994, Viana do Castelo, Hotel do Parque, Portugal Optical fibres, with their extremely low transmission loss, untapped bandwidth and controllable dispersion, dominate a broad range of technologies in which applications must respond to the increasing constraints of today's specifications as well as envisage future requirements. Optical fibres dominate communications systems. In the area of sensors, fibre optics will be fully exploited for their immunity to EMI, their high sensitivity and their large dynamic range. The maturity of single mode optical technology has led to intensive R&D of a range of components based on the advantages of transmission characteristics and signal processing. Specifications and intercompatibility requests for the new generation of both analogue and digital fibre optical components and systems has created a demand for sophisticated measuring techniques based on unique and complex instruments. In recent years there has been a signification evolution in response to the explosion of applications and the tightening of specifications. These developments justify a concerted effort to focus on trends in optical fibre metrology and standards. Objective The objective of this school is to provide a progressive and comprehensive presentation of current issues concerning passive and active optical fibre characterization and measurement techniques. Passive fibre components support a variety of developments in optical fibre systems and will be discussed in terms of relevance and standards. Particular attention will be paid to devices for metrological purposes such as reference fibres and calibration artefacts. The characterization and testing of optical fibre amplifiers, which have great potential in telecommunications, data distribution networks and as a system part in instrumentation, will be covered. Methods of measurement and means of calibration with traceability will be discussed, together with the characterization requirements of the new generation of analogue and digital fibre optical systems, which require sophisticated measurement techniques employing complex instruments unique to optical measurements. The school will foster and enhance the interaction between material, devices, systems, and standards-oriented R&D communities, as well as between engineers concerned with design and manufacturers of systems and instrumentation. Topics Review of optical fibre communication technology and systems Measurement techniques for fibre characterization: Reliability and traceability Reference fibres and calibration artefacts Ribbon fibres Mechanical and environmental testing Fibre reliability Polarimetric measurements Passive components characterization: Splices and connectors Couplers, splitters, taps and WDMs Optical fibres and isolators WDM technologies and applications: WDM technologies Tunable optical filters Fibre amplifiers and sources: Performances and characterization Design and standards Nonlinear effects Subsystem design and standards: Design and fabrication techniques Performance degradation and reliability Evaluation of costs/performance/technology Sensors IR - optical fibres Plastic fibres Instrumentation Registration Participation free of charge for postgraduate students, with some grants available for travel and lodging expenses. All correspondence should be addressed to: Secretariat, Trends in Optical Fibre Metrology and Standards, a/c Prof. Olivério D D Soares, Centro de Ciências e Tecnologias Opticas, Lab. Fisica - Faculdade de Ciências, Praça Gomes Teixeira, P-4000 Porto, Portugal. Tel: 351-2-310290, 351-2-2001648; Fax: 351-2-319267.

Self-Calibrated In-Process Photogrammetry for Large Raw Part Measurement and Alignment before Machining

PubMed Central

Mendikute, Alberto; Zatarain, Mikel; Bertelsen, Álvaro; Leizea, Ibai

2017-01-01

Photogrammetry methods are being used more and more as a 3D technique for large scale metrology applications in industry. Optical targets are placed on an object and images are taken around it, where measuring traceability is provided by precise off-process pre-calibrated digital cameras and scale bars. According to the 2D target image coordinates, target 3D coordinates and camera views are jointly computed. One of the applications of photogrammetry is the measurement of raw part surfaces prior to its machining. For this application, post-process bundle adjustment has usually been adopted for computing the 3D scene. With that approach, a high computation time is observed, leading in practice to time consuming and user dependent iterative review and re-processing procedures until an adequate set of images is taken, limiting its potential for fast, easy-to-use, and precise measurements. In this paper, a new efficient procedure is presented for solving the bundle adjustment problem in portable photogrammetry. In-process bundle computing capability is demonstrated on a consumer grade desktop PC, enabling quasi real time 2D image and 3D scene computing. Additionally, a method for the self-calibration of camera and lens distortion has been integrated into the in-process approach due to its potential for highest precision when using low cost non-specialized digital cameras. Measurement traceability is set only by scale bars available in the measuring scene, avoiding the uncertainty contribution of off-process camera calibration procedures or the use of special purpose calibration artifacts. The developed self-calibrated in-process photogrammetry has been evaluated both in a pilot case scenario and in industrial scenarios for raw part measurement, showing a total in-process computing time typically below 1 s per image up to a maximum of 2 s during the last stages of the computed industrial scenes, along with a relative precision of 1/10,000 (e.g., 0.1 mm error in 1 m) with an error RMS below 0.2 pixels at image plane, ranging at the same performance reported for portable photogrammetry with precise off-process pre-calibrated cameras. PMID:28891946

Self-Calibrated In-Process Photogrammetry for Large Raw Part Measurement and Alignment before Machining.

PubMed

Mendikute, Alberto; Yagüe-Fabra, José A; Zatarain, Mikel; Bertelsen, Álvaro; Leizea, Ibai

2017-09-09

Photogrammetry methods are being used more and more as a 3D technique for large scale metrology applications in industry. Optical targets are placed on an object and images are taken around it, where measuring traceability is provided by precise off-process pre-calibrated digital cameras and scale bars. According to the 2D target image coordinates, target 3D coordinates and camera views are jointly computed. One of the applications of photogrammetry is the measurement of raw part surfaces prior to its machining. For this application, post-process bundle adjustment has usually been adopted for computing the 3D scene. With that approach, a high computation time is observed, leading in practice to time consuming and user dependent iterative review and re-processing procedures until an adequate set of images is taken, limiting its potential for fast, easy-to-use, and precise measurements. In this paper, a new efficient procedure is presented for solving the bundle adjustment problem in portable photogrammetry. In-process bundle computing capability is demonstrated on a consumer grade desktop PC, enabling quasi real time 2D image and 3D scene computing. Additionally, a method for the self-calibration of camera and lens distortion has been integrated into the in-process approach due to its potential for highest precision when using low cost non-specialized digital cameras. Measurement traceability is set only by scale bars available in the measuring scene, avoiding the uncertainty contribution of off-process camera calibration procedures or the use of special purpose calibration artifacts. The developed self-calibrated in-process photogrammetry has been evaluated both in a pilot case scenario and in industrial scenarios for raw part measurement, showing a total in-process computing time typically below 1 s per image up to a maximum of 2 s during the last stages of the computed industrial scenes, along with a relative precision of 1/10,000 (e.g. 0.1 mm error in 1 m) with an error RMS below 0.2 pixels at image plane, ranging at the same performance reported for portable photogrammetry with precise off-process pre-calibrated cameras.

NASA Metrology and Calibration, 1980

NASA Technical Reports Server (NTRS)

1981-01-01

The proceedings of the fourth annual NASA Metrology and Calibration Workshop are presented. This workshop covered (1) review and assessment of NASA metrology and calibration activities by NASA Headquarters, (2) results of audits by the Office of Inspector General, (3) review of a proposed NASA Equipment Management System, (4) current and planned field center activities, (5) National Bureau of Standards (NBS) calibration services for NASA, (6) review of NBS's Precision Measurement and Test Equipment Project activities, (7) NASA instrument loan pool operations at two centers, (8) mobile cart calibration systems at two centers, (9) calibration intervals and decals, (10) NASA Calibration Capabilities Catalog, and (11) development of plans and objectives for FY 1981. Several papers in this proceedings are slide presentations only.

Progress in the analysis and interpretation of N2O isotopes: Potential and future challenges

NASA Astrophysics Data System (ADS)

Mohn, Joachim; Tuzson, Béla; Zellweger, Christoph; Harris, Eliza; Ibraim, Erkan; Yu, Longfei; Emmenegger, Lukas

2017-04-01

In recent years, research on nitrous oxide (N2O) stable isotopes has significantly advanced, addressing an increasing number of research questions in biogeochemical and atmospheric sciences [1]. An important milestone was the development of quantum cascade laser based spectroscopic devices [2], which are inherently specific for structural isomers (15N14N16O vs. 14N15N16O) and capable to collect real-time data with high temporal resolution, complementary to the well-established isotope-ratio mass-spectrometry (IRMS) method. In combination with automated preconcentration, optical isotope ratio spectroscopy (OIRS) has been applied to disentangle source processes in suburban, rural and pristine environments [e.g. 3, 4]. Within the European Metrology Research Programme (EMRP) ENV52 project "Metrology for high-impact greenhouse gases (HIGHGAS)", the quality of N2O stable isotope analysis by OIRS, the comparability between laboratories, and the traceability to the international isotope ratio scales have been addressed. An inter-laboratory comparison between eleven IRMS and OIRS laboratories, organised within HIGHGAS, indicated limited comparability for 15N site preference, i.e. the difference between 15N abundance in central (N*NO) and end (*NNO) position [5]. In addition, the accuracy of the NH4NO3 decomposition reaction, which provides the link between 15N site preference and the international 15N/14N scale, was found to be limited by non-quantitative NH4NO3 decomposition in combination with substantially different isotope enrichment factors for both nitrogen atoms [6]. Results of the HIGHGAS project indicate that the following research tasks have to be completed to foster research on N2O isotopes: 1) develop improved techniques to link the 15N and 18O abundance and the 15N site preference in N2O to the international stable isotope ratio scales; 2) provide N2O reference materials, pure and diluted in an air matrix, to improve inter-laboratory compatibility. These tasks will be addressed in the upcoming European Metrology Programme for Innovation and Research (EMPIR) project "Metrology for Stable Isotope Reference Standards (SIRS)" starting in June 2017. Acknowledgement Part of this work has been carried out within the European Metrology Research Programme (EMRP) ENV52 project-HIGHGAS. The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. References [1] S. Toyoda et al., Isotopocule analysis of biologically produced nitrous oxide in various environments, Mass Spectrom. Rev., Doi 10.1002/mas.21459 (2015). [2] J. Mohn et al., Site selective real-time measurements of atmospheric N2O isotopomers by laser spectroscopy, Atmos. Meas. Tech. 5(7), 1601-1609 (2012). [3] B. Wolf et al., First on-line isotopic characterization of N2O above intensively managed grassland, Biogeosci. 12, 2517-2531, (2015). [4] E. Harris et al., Tracking nitrous oxide emission processes at a suburban site with semi-continuous, in-situ measurements of isotopic composition, J. Geophys. Res. Atmos., accepted (2016). [5] J. Mohn et al., Interlaboratory assessment of nitrous oxide isotopomer analysis by isotope ratio mass spectrometry and laser spectroscopy: current status and perspectives, Rapid Commun. Mass Spectrom. 28, 1995-2007 (2014). [6] J. Mohn et al. Reassessment of the NH4NO3 thermal decomposition technique for calibration of the N2O isotopic composition, Rapid Commun. Mass Spectrom. 30, 2487-2496 (2016).

Progress of Multi-Beam Long Trace-Profiler Development

NASA Technical Reports Server (NTRS)

Gubarev, Mikhail; Kilaru, Kiranmayee; Merthe, Daniel J.; Kester, Thomas; McKinney, Wayne R.; Takacs, Peter Z.; Yashchuk, Valeriy V.

2012-01-01

The multi-beam long trace profiler (LTP) under development at NASA s Marshall Space Flight Center[1] is designed to increase the efficiency of metrology of replicated X-ray optics. The traditional LTP operates on a single laser beam that scans along the test surface to detect the slope errors. While capable of exceptional surface slope accuracy, the LTP single beam scanning has slow measuring speed. As metrology constitutes a significant fraction of the time spent in optics production, an increase in the efficiency of metrology helps in decreasing the cost of fabrication of the x-ray optics and in improving their quality. Metrology efficiency can be increased by replacing the single laser beam with multiple beams that can scan a section of the test surface at a single instance. The increase in speed with such a system would be almost proportional to the number of laser beams. A collaborative feasibility study has been made and specifications were fixed for a multi-beam long trace profiler. The progress made in the development of this metrology system is presented.

Wind Tunnel Balance Calibration: Are 1,000,000 Data Points Enough?

NASA Technical Reports Server (NTRS)

Rhew, Ray D.; Parker, Peter A.

2016-01-01

Measurement systems are typically calibrated based on standard practices established by a metrology standards laboratory, for example the National Institute for Standards and Technology (NIST), or dictated by an organization's metrology manual. Therefore, the calibration is designed and executed according to an established procedure. However, for many aerodynamic research measurement systems a universally accepted standard, traceable approach does not exist. Therefore, a strategy for how to develop a calibration protocol is left to the developer or user to define based on experience and recommended practice in their respective industry. Wind tunnel balances are one such measurement system. Many different calibration systems, load schedules and procedures have been developed for balances with little consensus on a recommended approach. Especially lacking is guidance the number of calibration data points needed. Regrettably, the number of data points tends to be correlated with the perceived quality of the calibration. Often, the number of data points is associated with ones ability to generate the data rather than by a defined need in support of measurement objectives. Hence the title of the paper was conceived to challenge recent observations in the wind tunnel balance community that shows an ever increasing desire for more data points per calibration absent of guidance to determine when there are enough. This paper presents fundamental concepts and theory to aid in the development of calibration procedures for wind tunnel balances and provides a framework that is generally applicable to the characterization and calibration of other measurement systems. Questions that need to be answered are for example: What constitutes an adequate calibration? How much data are needed in the calibration? How good is the calibration? This paper will assist a practitioner in answering these questions by presenting an underlying theory on how to evaluate a calibration based on objective measures. This will enable the developer and user to design calibrations with quantified performance in terms of their capability to meet the user's objectives and a basis for comparing existing calibrations that may have been developed in an ad-hoc manner.

Performances of OsO(4) stabilized CO(2) lasers as optical frequency standards near 29 THz.

PubMed

Daussy, C; Ducos, F; Rovera, G D; Acef, O

2000-01-01

In this paper, we report on the metrological capabilities of CO (2)/OsO(4) optical frequency standards operating around 29 THz. Those frequency standards are currently involved in various fields, such as frequency metrology, high resolution spectroscopy, and Rydberg constant measurements. The most impressive features of the standards lies in the 10(-15) level frequency stability allied to a long-term reproducibility (1 yr) of 1.3x10 (-13).

Enabling Quantitative Optical Imaging for In-die-capable Critical Dimension Targets

PubMed Central

Barnes, B.M.; Henn, M.-A.; Sohn, M. Y.; Zhou, H.; Silver, R. M.

2017-01-01

Dimensional scaling trends will eventually bring semiconductor critical dimensions (CDs) down to only a few atoms in width. New optical techniques are required to address the measurement and variability for these CDs using sufficiently small in-die metrology targets. Recently, Qin et al. [Light Sci Appl, 5, e16038 (2016)] demonstrated quantitative model-based measurements of finite sets of lines with features as small as 16 nm using 450 nm wavelength light. This paper uses simulation studies, augmented with experiments at 193 nm wavelength, to adapt and optimize the finite sets of features that work as in-die-capable metrology targets with minimal increases in parametric uncertainty. A finite element based solver for time-harmonic Maxwell's equations yields two- and three-dimensional simulations of the electromagnetic scattering for optimizing the design of such targets as functions of reduced line lengths, fewer number of lines, fewer focal positions, smaller critical dimensions, and shorter illumination wavelength. Metrology targets that exceeded performance requirements are as short as 3 μm for 193 nm light, feature as few as eight lines, and are extensible to sub-10 nm CDs. Target areas measured at 193 nm can be fifteen times smaller in area than current state-of-the-art scatterometry targets described in the literature. This new methodology is demonstrated to be a promising alternative for optical model-based in-die CD metrology. PMID:28757674

Traceability from a US perspective.

PubMed

Smith, G C; Tatum, J D; Belk, K E; Scanga, J A; Grandin, T; Sofos, J N

2005-09-01

Traceability of a food consists of development of "an information trail that follows the food product's physical trail". Internationally, the US is lagging behind many countries in developing traceability systems for food in general and especially for livestock, poultry and their products. The US food industry is developing, implementing and maintaining traceability systems designed to improve food supply management, facilitate traceback for food safety and quality, and differentiate and market foods with subtle or undetectable quality attributes. Traceability, for livestock, poultry and meat, in its broadest context, can, could, or will eventually be used: (1) to ascertain origin and ownership, and to deter theft and misrepresentation, of animals and meat; (2) for surveillance, control and eradication of foreign animal diseases; (3) for biosecurity protection of the national livestock population; (4) for compliance with requirements of international customers; (5) for compliance with country-of-origin labeling requirements; (6) for improvement of supply-side management, distribution/delivery systems and inventory controls; (7) to facilitate value-based marketing; (8) to facilitate value-added marketing; (9) to isolate the source and extent of quality-control and food-safety problems; and (10) to minimize product recalls and make crisis management protocols more effective. Domestically and internationally, it has now become essential that producers, packers, processors, wholesalers, exporters and retailers assure that livestock, poultry and meat are identified, that record-keeping assures traceability through all or parts of the complete life-cycle, and that, in some cases, the source, the production-practices and/or the process of generating final products, can be verified. At issue, as the US develops traceback capabilities, will be the breadth, depth and precision of its specific traceability systems.

The international surface temperature initiative

NASA Astrophysics Data System (ADS)

Thorne, P. W.; Lawrimore, J. H.; Willett, K. M.; Allan, R.; Chandler, R. E.; Mhanda, A.; de Podesta, M.; Possolo, A.; Revadekar, J.; Rusticucci, M.; Stott, P. A.; Strouse, G. F.; Trewin, B.; Wang, X. L.; Yatagai, A.; Merchant, C.; Merlone, A.; Peterson, T. C.; Scott, E. M.

2013-09-01

The aim of International Surface Temperature Initiative is to create an end-to-end process for analysis of air temperature data taken over the land surface of the Earth. The foundation of any analysis is the source data. Land surface air temperature records have traditionally been stored in local, organizational, national and international holdings, some of which have been available digitally but many of which are available solely on paper or as imaged files. Further, economic and geopolitical realities have often precluded open sharing of these data. The necessary first step therefore is to collate readily available holdings and augment these over time either through gaining access to previously unavailable digital data or through data rescue and digitization activities. Next, it must be recognized that these historical measurements were made primarily in support of real-time weather applications where timeliness and coverage are key. At almost every long-term station it is virtually certain that changes in instrumentation, siting or observing practices have occurred. Because none of the historical measures were made in a metrologically traceable manner there is no unambiguous way to retrieve the true climate evolution from the heterogeneous raw data holdings. Therefore it is desirable for multiple independent groups to produce adjusted data sets (so-called homogenized data) to adequately understand the data characteristics and estimate uncertainties. Then it is necessary to benchmark the performance of the contributed algorithms (equivalent to metrological software validation) through development of realistic benchmark datasets. In support of this, a series of successive benchmarking and assessment cycles are envisaged, allowing continual improvement while avoiding over-tuning of algorithms. Finally, a portal is proposed giving access to related data-products, utilizing the assessment results to provide guidance to end-users on which product is the most suited to their needs. Recognizing that the expertise of the metrological community has been under-utilized historically in such climate data analysis problems, the governance of the Initiative includes significant representation from the metrological community. We actively welcome contributions from interested parties to any relevant aspects of the Initiative work.

Meta-Cresol Purple Reference Material® (RM) for Seawater pH Measurements

NASA Astrophysics Data System (ADS)

Easley, R. A.; Waters, J. F.; Place, B. J.; Pratt, K. W.

2016-02-01

The pH of seawater is a fundamental quantity that governs the carbon dioxide - carbonate system in the world's oceans. High quality pH measurements for long-term monitoring, shipboard studies, and shorter-term biological studies (mesocosm and field experiments) can be ensured through a reference material (RM) that is compatible with existing procedures and which is traceable to primary pH measurement metrology. High-precision spectrophotometric measurements of seawater pH using an indicator dye such as meta-cresol purple (mCP) are well established. However, traceability of these measurements to the International System of Units (SI) additionally requires characterizing the spectrophotometric pH response of the dye in multiple artificial seawater buffers that themselves are benchmarked via primary pH (Harned cell) measurements at a range of pH, salinity, and temperature. NIST is currently developing such a mCP pH RM using this approach. This material will also incorporate new procedures developed at NIST for assessing the purity and homogeneity of the mCP reagent itself. The resulting mCP will provide long-term (years) stability and ease of shipment compared to artificial seawater pH buffers. These efforts will provide the oceanographic user community with a NIST issued mCP (RM), characterized as to its molar absorptivity values and acid dissociation constants (pKa), with uncertainties that comply with the Guide to the Expression of Uncertainty in Measurement (GUM).

Development, characterization, and validation of an optical transfer standard for ammonia in air

NASA Astrophysics Data System (ADS)

Lüttschwager, Nils; Balslev-Harder, David; Leuenberger, Daiana; Pogány, Andrea; Werhahn, Olav; Ebert, Volker

2017-04-01

Ammonia is an atmospheric trace gas that is predominantly emitted from anthropogenic agricultural activities. Since elevated levels of ammonia can have negative effects to human health as well as ecosystems, it is imperative to monitor and control ammonia emissions. This requires SI-traceable standards to calibrate ammonia monitoring instrumentation and to make measurements comparable. The lack of such standards became a pressing issue in recent years and the MetNH3 project (www.metnh3.eu) was initiated to fill the gap, pursuing different strategies. The work that we present was part of these endeavours and focusses on the development and application of an optical transfer standard for amount fraction measurements of ammonia in ambient air. An optical transfer standard (OTS) offers an alternative to calibrations of air monitoring instrumentation by means of reference gas mixtures. With an OTS, absolute amount fraction results are derived by evaluating absorption spectra using a spectral model and pre-measured spectral properties of the analyte. In that way, the instrument can measure calibration gas-independent ("calibration-free") and, moreover, can itself serve as standard to calibrate air monitoring analyzers. Molecular spectral properties are the excellent, non-drifting point of reference of the OTS and form, together with traceable measurements of temperature and pressure, the basis for SI-traceable amount fraction measurements. We developed an OTS based on a commercial cavity-ring-down spectrometer with a detection limit below 1 ppb (1 nmol/mol). A custom spectral data evaluation routine for absolute, calibration-free measurements, as well as measurements of spectral properties of ammonia with the focus on measurement uncertainty and traceability [1] are the fundaments of our OTS. Validation measurements were conducted using a SI-traceable ammonia reference gas generator over a period of several months. Here, we present an evaluation of the performance of our OTS from 1 ppb to 200 ppb. We found the results obtained with the OTS to be concordant to reference gas mixtures yielding amount fraction results with standard uncertainties of less than 3 %, for which an uncertainty budget is provided. Acknowledgement: This work was supported by the European Metrology Research Programme (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. References 1. A. Pogány, O. Werhahn, and V. Ebert, High-Accuracy Ammonia Line Intensity Measurements at 1.5 µm, in Imaging and Applied Optics 2016, OSA Technical Digest (online) (Optical Society of America, 2016), paper JT3A.15, DOI: 10.1364/3D.2016.JT3A.15

Thermodynamic Temperature Measurement to the Indium Point Based on Radiance Comparison

NASA Astrophysics Data System (ADS)

Yamaguchi, Y.; Yamada, Y.

2017-04-01

A multi-national project (the EMRP InK project) was completed recently, which successfully determined the thermodynamic temperatures of several of the high-temperature fixed points above the copper point. The National Metrology Institute of Japan contributed to this project with its newly established absolute spectral radiance calibration capability. In the current study, we have extended the range of thermodynamic temperature measurement to below the copper point and measured the thermodynamic temperatures of the indium point (T_{90} = 429.748 5 K), tin point (505.078 K), zinc point (692.677 K), aluminum point (933.473 K) and the silver point (1 234.93 K) by radiance comparison against the copper point, with a set of radiation thermometers having center wavelengths ranging from 0.65 μm to 1.6 μm. The copper-point temperature was measured by the absolute radiation thermometer which was calibrated by radiance method traceable to the electrical substitution cryogenic radiometer. The radiance of the fixed-point blackbodies was measured by standard radiation thermometers whose spectral responsivity and nonlinearity are precisely evaluated, and then the thermodynamic temperatures were determined from radiance ratios to the copper point. The values of T-T_{90} for the silver-, aluminum-, zinc-, tin- and indium-point cells were determined as -4 mK (U = 104 mK, k=2), -99 mK (88 mK), -76 mK (76 mK), -68 mK (163 mK) and -42 mK (279 mK), respectively.

High-Speed Digital Interferometry

NASA Technical Reports Server (NTRS)

De Vine, Glenn; Shaddock, Daniel A.; Ware, Brent; Spero, Robert E.; Wuchenich, Danielle M.; Klipstein, William M.; McKenzie, Kirk

2012-01-01

Digitally enhanced heterodyne interferometry (DI) is a laser metrology technique employing pseudo-random noise (PRN) codes phase-modulated onto an optical carrier. Combined with heterodyne interferometry, the PRN code is used to select individual signals, returning the inherent interferometric sensitivity determined by the optical wavelength. The signal isolation arises from the autocorrelation properties of the PRN code, enabling both rejection of spurious signals (e.g., from scattered light) and multiplexing capability using a single metrology system. The minimum separation of optical components is determined by the wavelength of the PRN code.

Tip Characterization Method using Multi-feature Characterizer for CD-AFM

PubMed Central

Orji, Ndubuisi G.; Itoh, Hiroshi; Wang, Chumei; Dixson, Ronald G.; Walecki, Peter S.; Schmidt, Sebastian W.; Irmer, Bernd

2016-01-01

In atomic force microscopy (AFM) metrology, the tip is a key source of uncertainty. Images taken with an AFM show a change in feature width and shape that depends on tip geometry. This geometric dilation is more pronounced when measuring features with high aspect ratios, and makes it difficult to obtain absolute dimensions. In order to accurately measure nanoscale features using an AFM, the tip dimensions should be known with a high degree of precision. We evaluate a new AFM tip characterizer, and apply it to critical dimension AFM (CD-AFM) tips used for high aspect ratio features. The characterizer is made up of comb-shaped lines and spaces, and includes a series of gratings that could be used as an integrated nanoscale length reference. We also demonstrate a simulation method that could be used to specify what range of tip sizes and shapes the characterizer can measure. Our experiments show that for non re-entrant features, the results obtained with this characterizer are consistent to 1 nm with the results obtained by using widely accepted but slower methods that are common practice in CD-AFM metrology. A validation of the integrated length standard using displacement interferometry indicates a uniformity of better than 0.75%, suggesting that the sample could be used as highly accurate and SI traceable lateral scale for the whole evaluation process. PMID:26720439

Towards tributyltin quantification in natural water at the Environmental Quality Standard level required by the Water Framework Directive.

PubMed

Alasonati, Enrica; Fettig, Ina; Richter, Janine; Philipp, Rosemarie; Milačič, Radmila; Sčančar, Janez; Zuliani, Tea; Tunç, Murat; Bilsel, Mine; Gören, Ahmet Ceyhan; Fisicaro, Paola

2016-11-01

The European Union (EU) has included tributyltin (TBT) and its compounds in the list of priority water pollutants. Quality standards demanded by the EU Water Framework Directive (WFD) require determination of TBT at so low concentration level that chemical analysis is still difficult and further research is needed to improve the sensitivity, the accuracy and the precision of existing methodologies. Within the frame of a joint research project "Traceable measurements for monitoring critical pollutants under the European Water Framework Directive" in the European Metrology Research Programme (EMRP), four metrological and designated institutes have developed a primary method to quantify TBT in natural water using liquid-liquid extraction (LLE) and species-specific isotope dilution mass spectrometry (SSIDMS). The procedure has been validated at the Environmental Quality Standard (EQS) level (0.2ngL(-1) as cation) and at the WFD-required limit of quantification (LOQ) (0.06ngL(-1) as cation). The LOQ of the methodology was 0.06ngL(-1) and the average measurement uncertainty at the LOQ was 36%, which agreed with WFD requirements. The analytical difficulties of the method, namely the presence of TBT in blanks and the sources of measurement uncertainties, as well as the interlaboratory comparison results are discussed in detail. Copyright © 2016 Elsevier B.V. All rights reserved.

Size characterization of airborne SiO2 nanoparticles with on-line and off-line measurement techniques: an interlaboratory comparison study

NASA Astrophysics Data System (ADS)

Motzkus, C.; Macé, T.; Gaie-Levrel, F.; Ducourtieux, S.; Delvallee, A.; Dirscherl, K.; Hodoroaba, V.-D.; Popov, I.; Popov, O.; Kuselman, I.; Takahata, K.; Ehara, K.; Ausset, P.; Maillé, M.; Michielsen, N.; Bondiguel, S.; Gensdarmes, F.; Morawska, L.; Johnson, G. R.; Faghihi, E. M.; Kim, C. S.; Kim, Y. H.; Chu, M. C.; Guardado, J. A.; Salas, A.; Capannelli, G.; Costa, C.; Bostrom, T.; Jämting, Å. K.; Lawn, M. A.; Adlem, L.; Vaslin-Reimann, S.

2013-10-01

Results of an interlaboratory comparison on size characterization of SiO2 airborne nanoparticles using on-line and off-line measurement techniques are discussed. This study was performed in the framework of Technical Working Area (TWA) 34—"Properties of Nanoparticle Populations" of the Versailles Project on Advanced Materials and Standards (VAMAS) in the project no. 3 "Techniques for characterizing size distribution of airborne nanoparticles". Two types of nano-aerosols, consisting of (1) one population of nanoparticles with a mean diameter between 30.3 and 39.0 nm and (2) two populations of non-agglomerated nanoparticles with mean diameters between, respectively, 36.2-46.6 nm and 80.2-89.8 nm, were generated for characterization measurements. Scanning mobility particle size spectrometers (SMPS) were used for on-line measurements of size distributions of the produced nano-aerosols. Transmission electron microscopy, scanning electron microscopy, and atomic force microscopy were used as off-line measurement techniques for nanoparticles characterization. Samples were deposited on appropriate supports such as grids, filters, and mica plates by electrostatic precipitation and a filtration technique using SMPS controlled generation upstream. The results of the main size distribution parameters (mean and mode diameters), obtained from several laboratories, were compared based on metrological approaches including metrological traceability, calibration, and evaluation of the measurement uncertainty. Internationally harmonized measurement procedures for airborne SiO2 nanoparticles characterization are proposed.

EDITORIAL: Nanoscale metrology Nanoscale metrology

NASA Astrophysics Data System (ADS)

Picotto, G. B.; Koenders, L.; Wilkening, G.

2009-08-01

Instrumentation and measurement techniques at the nanoscale play a crucial role not only in extending our knowledge of the properties of matter and processes in nanosciences, but also in addressing new measurement needs in process control and quality assurance in industry. Micro- and nanotechnologies are now facing a growing demand for quantitative measurements to support the reliability, safety and competitiveness of products and services. Quantitative measurements presuppose reliable and stable instruments and measurement procedures as well as suitable calibration artefacts to ensure the quality of measurements and traceability to standards. This special issue of Measurement Science and Technology presents selected contributions from the Nanoscale 2008 seminar held at the Istituto Nazionale di Ricerca Metrologica (INRIM), Torino, in September 2008. This was the 4th Seminar on Nanoscale Calibration Standards and Methods and the 8th Seminar on Quantitative Microscopy (the first being held in 1995). The seminar was jointly organized by the Nanometrology Group within EUROMET (The European Collaboration in Measurement Standards), the German Nanotechnology Competence Centre 'Ultraprecise Surface Figuring' (CC-UPOB), the Physikalisch-Technische Bundesanstalt (PTB) and INRIM. A special event during the seminar was the 'knighting' of Günter Wilkening from PTB, Braunschweig, Germany, as the 1st Knight of Dimensional Nanometrology. Günter Wilkening received the NanoKnight Award for his outstanding work in the field of dimensional nanometrology over the last 20 years. The contributions in this special issue deal with the developments and improvements of instrumentation and measurement methods for scanning force microscopy (SFM), electron and optical microscopy, high-resolution interferometry, calibration of instruments and new standards, new facilities and applications including critical dimension (CD) measurements on small and medium structures and nanoparticle characterization. The papers in the first part report on new or improved instrumentation, details of developments of metrology SFM, improvements to SFM, probes and scanning methods in the direction of nanoscale coordinate measuring machines and true 3D measurements as well as of progress of a 2D encoder based on a regular crystalline lattice. To ensure traceability to the SI unit of length many highly sophisticated instruments are equipped with laser interferometers to measure small displacements in the nanometre range very accurately. Improving these techniques is still a challenge and therefore new interferometric techniques are considered in several papers as well as improved sensors for nanodisplacement measurements or the development of a deep UV microscope for micro- and nanostructures. The tactile measurement of small structures also calls for a better control of forces in the nano- and piconewton range. A nanoforce facility, based on a disk-pendulum with electrostatic stiffness reduction and electrostatic force compensation, is presented for the measurement of small forces. In the second part the contributions are related to calibration and correction strategies and standards such as the development of test objects based on 3D silicon structures, and of samples with irregular surface profiles, and their use for calibration. The shape of the tip and its influence on measurements is still a contentious issue and addressed in several papers: use of nanospheres for tip characterization, a geometrical approach for reconstruction errors by tactile probing. Molecular dynamical calculations, classical as well as ab initio (based on density functional theory), are used to discuss effects of tip-sample relaxation on the topography and to have a better base from which to estimate uncertainties in measurements of small particles or features. Some papers report about measurements of air refractivity fluctuations by phase modulation interferometry, angle-scale traceability by laser diffractometry, and an error separation method. The development of 3D surface roughness measurement standards from scratches is considered in one contribution. Here a 2D autoregressive model was used to generate the software gauge data, which were used as a base for the manufacturing process by diamond turning. Contributions in the third part deal with applications including CD measurements on small and medium structures, the characterization of nanoparticles with a diameter less than 200 nm by electron microscopy, chemical nanoscale metrology by TXRF and a study of the strength of nanotube bundles. We would like to thank all the authors for their contributions, and the referees for their time spent reviewing all the papers and for making their valuable and helpful comments. Additional thanks are extended to all involved in the production of this issue for their help and support.

State of the art stationary and mobile infrastructure for the dynamic generation and dilution of traceable reference gas mixtures of Ammonia at ambient air amount fractions

NASA Astrophysics Data System (ADS)

Leuenberger, Daiana; Pascale, Céline; Guillevic, Myriam; Ackermann, Andreas; Niederhauser, Bernhard

2017-04-01

Ammonia (NH3) in the atmosphere is the major precursor for neutralising atmospheric acids and is thus affecting not only the long-range transport of sulphur dioxide and nitrogen oxides but also stabilises secondary particulate matter. These aerosols have negative impacts on air quality and human health. Moreover, they negatively affect terrestrial ecosystems after deposition. NH3 has been included in the air quality monitoring networks and emission reduction directives of European nations. Atmospheric concentrations are in the order of 0.5-500 nmol/mol. However, the lowest substance amount fraction of available certified reference material (CRM) is 10 μmol/mol. This due to the fact that adsorption on the walls of aluminium cylinders and desorption as pressure in the cylinder decreases cause substantial instabilities in the amount fractions of the gas mixtures. Moreover, analytical techniques to be calibrated are very diverse and cause challenges for the production and application of CRM. The Federal Institute of Metrology METAS has developed, partially in the framework of EMRP JRP ENV55 MetNH3, an infrastructure to meet with the different requirements in order to generate SI-traceable NH3 reference gas mixtures dynamically in the amount fraction range 0.5-500 nmol/mol and with uncertainties UNH3 <3%. The infrastructure consists of a stationary as well as a mobile device for full flexibility in the application: In the stationary system, a magnetic suspension balance monitors the specific temperature and pressure dependent mass loss over time of the pure substance in a permeation tube (here NH3) by permeation through a membrane into a constant flow of carrier gas. Subsequently, this mixture is diluted with a system of thermal mass flow controllers in one or two consecutive steps to desired amount fractions. The permeation tube with calibrated permeation rate (mass loss over time previously determined in the magnetic suspension balance) can be transferred into the temperature-regulated permeation chamber of a newly developed mobile reference gas generator (ReGaS1). In addition to the permeation chamber it consists of the same dilution system as afore mentioned, stationary system. All components are fully traceable to SI standards. Considerable effort has been made to minimise adsorption on the gas-wetted stainless steel surfaces and thus to reduce stabilisation times by applying the SilcoNert2000® coating substance. Analysers can be connected directly to both, stationary and mobile systems for calibration. Moreover, the resulting gas mixture can also be pressurised into coated cylinders by cryo-filling. The mobile system as well as these cylinders can be applied for calibrations in other laboratories and in the field. In addition, an SI traceable system based on a cascade of critical orifices has been established to dilute NH3 mixtures in the order of μmol/mol stored in cylinders for the participation in the international key-comparison CCQM K117. It is planned to establish this system to calibrate and re-sample gas cylinders due to its very economical gas use. Here we present insights into the development of said infrastructure and results of the first performance tests. Moreover, we include results of the study on adsorption/desorption effects in dry as well as humidified matrix gas into the discussion on the generation of reference gas mixtures. Acknowledgement: This work was supported by the European Metrology Research Programme (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union.

Next generation of decision making software for nanopatterns characterization: application to semiconductor industry

NASA Astrophysics Data System (ADS)

Dervilllé, A.; Labrosse, A.; Zimmermann, Y.; Foucher, J.; Gronheid, R.; Boeckx, C.; Singh, A.; Leray, P.; Halder, S.

2016-03-01

The dimensional scaling in IC manufacturing strongly drives the demands on CD and defect metrology techniques and their measurement uncertainties. Defect review has become as important as CD metrology and both of them create a new metrology paradigm because it creates a completely new need for flexible, robust and scalable metrology software. Current, software architectures and metrology algorithms are performant but it must be pushed to another higher level in order to follow roadmap speed and requirements. For example: manage defect and CD in one step algorithm, customize algorithms and outputs features for each R&D team environment, provide software update every day or every week for R&D teams in order to explore easily various development strategies. The final goal is to avoid spending hours and days to manually tune algorithm to analyze metrology data and to allow R&D teams to stay focus on their expertise. The benefits are drastic costs reduction, more efficient R&D team and better process quality. In this paper, we propose a new generation of software platform and development infrastructure which can integrate specific metrology business modules. For example, we will show the integration of a chemistry module dedicated to electronics materials like Direct Self Assembly features. We will show a new generation of image analysis algorithms which are able to manage at the same time defect rates, images classifications, CD and roughness measurements with high throughput performances in order to be compatible with HVM. In a second part, we will assess the reliability, the customization of algorithm and the software platform capabilities to follow new specific semiconductor metrology software requirements: flexibility, robustness, high throughput and scalability. Finally, we will demonstrate how such environment has allowed a drastic reduction of data analysis cycle time.

Statistical evaluation of PACSTAT random number generation capabilities

DOE Office of Scientific and Technical Information (OSTI.GOV)

Piepel, G.F.; Toland, M.R.; Harty, H.

1988-05-01

This report summarizes the work performed in verifying the general purpose Monte Carlo driver-program PACSTAT. The main objective of the work was to verify the performance of PACSTAT's random number generation capabilities. Secondary objectives were to document (using controlled configuration management procedures) changes made in PACSTAT at Pacific Northwest Laboratory, and to assure that PACSTAT input and output files satisfy quality assurance traceability constraints. Upon receipt of the PRIME version of the PACSTAT code from the Basalt Waste Isolation Project, Pacific Northwest Laboratory staff converted the code to run on Digital Equipment Corporation (DEC) VAXs. The modifications to PACSTAT weremore » implemented using the WITNESS configuration management system, with the modifications themselves intended to make the code as portable as possible. Certain modifications were made to make the PACSTAT input and output files conform to quality assurance traceability constraints. 10 refs., 17 figs., 6 tabs.« less

Thermal Protection Test Bed Pathfinder Development Project

NASA Technical Reports Server (NTRS)

Snapp, Cooper

2015-01-01

In order to increase thermal protection capabilities for future reentry vehicles, a method to obtain relevant test data is required. Although arc jet testing can be used to obtain some data on materials, the best method to obtain these data is to actually expose them to an atmospheric reentry. The overprediction of the Orion EFT-1 flight data is an example of how the ground test to flight traceability is not fully understood. The RED-Data small reentry capsule developed by Terminal Velocity Aerospace is critical to understanding this traceability. In order to begin to utilize this technology, ES3 needs to be ready to build and integrate heat shields onto the RED-Data vehicle. Using a heritage Shuttle tile material for the heat shield will both allow valuable insight into the environment that the RED-Data vehicle can provide and give ES3 the knowledge and capability to build and integrate future heat shields for this vehicle.

Driving imaging and overlay performance to the limits with advanced lithography optimization

NASA Astrophysics Data System (ADS)

Mulkens, Jan; Finders, Jo; van der Laan, Hans; Hinnen, Paul; Kubis, Michael; Beems, Marcel

2012-03-01

Immersion lithography is being extended to 22-nm and even below. Next to generic scanner system improvements, application specific solutions are needed to follow the requirements for CD control and overlay. Starting from the performance budgets, this paper discusses how to improve (in volume manufacturing environment) CDU towards 1-nm and overlay towards 3-nm. The improvements are based on deploying the actuator capabilities of the immersion scanner. The latest generation immersion scanners have extended the correction capabilities for overlay and imaging, offering freeform adjustments of lens, illuminator and wafer grid. In order to determine the needed adjustments the recipe generation per user application is based on a combination wafer metrology data and computational lithography methods. For overlay, focus and CD metrology we use an angle resolved optical scatterometer.

Unique method for controlling device level overlay with high-NA optical overlay technique using YieldStar in a DRAM HVM environment

NASA Astrophysics Data System (ADS)

Park, Dong-Kiu; Kim, Hyun-Sok; Seo, Moo-Young; Ju, Jae-Wuk; Kim, Young-Sik; Shahrjerdy, Mir; van Leest, Arno; Soco, Aileen; Miceli, Giacomo; Massier, Jennifer; McNamara, Elliott; Hinnen, Paul; Böcker, Paul; Oh, Nang-Lyeom; Jung, Sang-Hoon; Chai, Yvon; Lee, Jun-Hyung

2018-03-01

This paper demonstrates the improvement using the YieldStar S-1250D small spot, high-NA, after-etch overlay in-device measurements in a DRAM HVM environment. It will be demonstrated that In-device metrology (IDM) captures after-etch device fingerprints more accurately compared to the industry-standard CDSEM. Also, IDM measurements (acquiring both CD and overlay) can be executed significantly faster increasing the wafer sampling density that is possible within a realistic metrology budget. The improvements to both speed and accuracy open the possibility of extended modeling and correction capabilities for control. The proof-book data of this paper shows a 36% improvement of device overlay after switching to control in a DRAM HVM environment using indevice metrology.

An Assessment of Critical Dimension Small Angle X-ray Scattering Metrology for Advanced Semiconductor Manufacturing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Settens, Charles M.

2015-01-01

Simultaneous migration of planar transistors to FinFET architectures, the introduction of a plurality of materials to ensure suitable electrical characteristics, and the establishment of reliable multiple patterning lithography schemes to pattern sub-10 nm feature sizes imposes formidable challenges to current in-line dimensional metrologies. Because the shape of a FinFET channel cross-section immediately influences the electrical characteristics, the evaluation of 3D device structures requires measurement of parameters beyond traditional critical dimension (CD), including their sidewall angles, top corner rounding and footing, roughness, recesses and undercuts at single nanometer dimensions; thus, metrologies require sub-nm and approaching atomic level measurement uncertainty. Synchrotron criticalmore » dimension small angle X-ray scattering (CD-SAXS) has unique capabilities to non-destructively monitor the cross-section shape of surface structures with single nanometer uncertainty and can perform overlay metrology to sub-nm uncertainty. In this dissertation, we perform a systematic experimental investigation using CD-SAXS metrology on a hierarchy of semiconductor 3D device architectures including, high-aspect-ratio contact holes, H2 annealed Si fins, and a series of grating type samples at multiple points along a FinFET fabrication process increasing in structural intricacy and ending with fully fabricated FinFET. Comparative studies between CD-SAXS metrology and other relevant semiconductor dimensional metrologies, particularly CDSEM, CD-AFM and TEM are used to determine physical limits of CD-SAXS approach for advanced semiconductor samples. CD-SAXS experimental tradeoffs, advice for model-dependent analysis and thoughts on the compatibility with a semiconductor manufacturing environment are discussed.« less

Measuring Uranium Decay Rates for Advancement of Nuclear Forensics and Geochronology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Parsons-Davis, Tashi

Radioisotopic dating techniques are highly valuable tools for understanding the history of physical and chemical processes in materials related to planetary sciences and nuclear forensics, and rely on accurate knowledge of decay constants and their uncertainties. The decay constants of U-238 and U-235 are particularly important to Earth science, and often the measured values with lowest reported uncertainties are applied, although they have not been independently verified with similar precision. New direct measurements of the decay constants of U-238, Th-234, U-235, and U-234 were completed, using a range of analytical approaches. An overarching goal of the project was to ensuremore » the quality of results, including metrological traceability to facilitate implementation across diverse disciplines. This report presents preliminary results of these experiments, as a few final measurements and calculations are still in progress.« less

Effects of the pH and Concentration on the Stability of Standard Solutions of Proteinogenic Amino Acid Mixtures.

PubMed

Kato, Megumi; Yamazaki, Taichi; Kato, Hisashi; Yamanaka, Noriko; Takatsu, Akiko; Ihara, Toshihide

2017-01-01

To prepare metrologically traceable amino acid mixed standard solutions, it is necessary to determine the stability of each amino acid present in the mixed solutions. In the present study, we prepared amino acid mixed solutions using certified reference standards of 17 proteinogenic amino acids, and examined the stability of each of these amino acids in 0.1 N HCl. We found that the concentration of glutamic acid decreased significantly during storage. LC/MS analysis indicated that the instability of glutamic acid was due to the partial degradation of glutamic acid to pyroglutamic acid in 0.1 N HCl. Using accelerated degradation tests, we investigated several solvent compositions to improve the stability of glutamic acid in amino acid mixed solution, and determined that the change of the pH by diluting the mixed solution improved the stability of glutamic acid.

Accreditation of medical laboratories in Croatia--experiences of the Institute of Clinical Chemistry, University Hospital "Merkur", Zagreb.

PubMed

Flegar-Mestrić, Zlata; Nazor, Aida; Perkov, Sonja; Surina, Branka; Kardum-Paro, Mirjana Mariana; Siftar, Zoran; Sikirica, Mirjana; Sokolić, Ivica; Ozvald, Ivan; Vidas, Zeljko

2010-03-01

Since 2003 when the international norm for implementation of quality management in medical laboratories (EN ISO 15189, Medical laboratories--Particular requirements for quality and competence) was established and accepted, accreditation has become practical, generally accepted method of quality management and confirmation of technical competence of medical laboratories in the whole world. This norm has been translated into Croatian and accepted by the Croatian Institute for Norms as Croatian norm. Accreditation is carried out on voluntary basis by the Croatian Accreditation Agency that has up to now accredited two clinical medical biochemical laboratories in the Republic of Croatia. Advantages of accredited laboratory lie in its documented management system, constant improvement and training, reliability of test results, establishing users' trust in laboratory services, test results comparability and interlaboratory (international) test results acceptance by adopting the concept of metrological traceability in laboratory medicine.

In-Line Detection and Measurement of Molecular Contamination in Semiconductor Process Solutions

NASA Astrophysics Data System (ADS)

Wang, Jason; West, Michael; Han, Ye; McDonald, Robert C.; Yang, Wenjing; Ormond, Bob; Saini, Harmesh

2005-09-01

This paper discusses a fully automated metrology tool for detection and quantitative measurement of contamination, including cationic, anionic, metallic, organic, and molecular species present in semiconductor process solutions. The instrument is based on an electrospray ionization time-of-flight mass spectrometer (ESI-TOF/MS) platform. The tool can be used in diagnostic or analytical modes to understand process problems in addition to enabling routine metrology functions. Metrology functions include in-line contamination measurement with near real-time trend analysis. This paper discusses representative organic and molecular contamination measurement results in production process problem solving efforts. The examples include the analysis and identification of organic compounds in SC-1 pre-gate clean solution; urea, NMP (N-Methyl-2-pyrrolidone) and phosphoric acid contamination in UPW; and plasticizer and an organic sulfur-containing compound found in isopropyl alcohol (IPA). It is expected that these unique analytical and metrology capabilities will improve the understanding of the effect of organic and molecular contamination on device performance and yield. This will permit the development of quantitative correlations between contamination levels and process degradation. It is also expected that the ability to perform routine process chemistry metrology will lead to corresponding improvements in manufacturing process control and yield, the ability to avoid excursions and will improve the overall cost effectiveness of the semiconductor manufacturing process.

Metrology Optical Power Budgeting in SIM Using Statistical Analysis Techniques

NASA Technical Reports Server (NTRS)

Kuan, Gary M

2008-01-01

The Space Interferometry Mission (SIM) is a space-based stellar interferometry instrument, consisting of up to three interferometers, which will be capable of micro-arc second resolution. Alignment knowledge of the three interferometer baselines requires a three-dimensional, 14-leg truss with each leg being monitored by an external metrology gauge. In addition, each of the three interferometers requires an internal metrology gauge to monitor the optical path length differences between the two sides. Both external and internal metrology gauges are interferometry based, operating at a wavelength of 1319 nanometers. Each gauge has fiber inputs delivering measurement and local oscillator (LO) power, split into probe-LO and reference-LO beam pairs. These beams experience power loss due to a variety of mechanisms including, but not restricted to, design efficiency, material attenuation, element misalignment, diffraction, and coupling efficiency. Since the attenuation due to these sources may degrade over time, an accounting of the range of expected attenuation is needed so an optical power margin can be book kept. A method of statistical optical power analysis and budgeting, based on a technique developed for deep space RF telecommunications, is described in this paper and provides a numerical confidence level for having sufficient optical power relative to mission metrology performance requirements.

Microeconomics of yield learning and process control in semiconductor manufacturing

NASA Astrophysics Data System (ADS)

Monahan, Kevin M.

2003-06-01

Simple microeconomic models that directly link yield learning to profitability in semiconductor manufacturing have been rare or non-existent. In this work, we review such a model and provide links to inspection capability and cost. Using a small number of input parameters, we explain current yield management practices in 200mm factories. The model is then used to extrapolate requirements for 300mm factories, including the impact of technology transitions to 130nm design rules and below. We show that the dramatic increase in value per wafer at the 300mm transition becomes a driver for increasing metrology and inspection capability and sampling. These analyses correlate well wtih actual factory data and often identify millions of dollars in potential cost savings. We demonstrate this using the example of grating-based overlay metrology for the 65nm node.

The future of 2D metrology for display manufacturing

NASA Astrophysics Data System (ADS)

Sandstrom, Tor; Wahlsten, Mikael; Park, Youngjin

2016-10-01

The race to 800 PPI and higher in mobile devices and the transition to OLED displays are driving a dramatic development of mask quality: resolution, CDU, registration, and complexity. 2D metrology for large area masks is necessary and must follow the roadmap. Driving forces in the market place point to continued development of even more dense displays. State-of-the-art metrology has proven itself capable of overlay below 40 nm and registration below 65 nm for G6 masks. Future developments include incoming and recurrent measurements of pellicalized masks at the panel maker's factory site. Standardization of coordinate systems across supplier networks is feasible. This will enable better yield and production economy for both mask and panel maker. Better distortion correction methods will give better registration on the panels and relax the flatness requirements of the mask blanks. If panels are measured together with masks and the results are used to characterize the aligners, further quality and yield improvements are possible. Possible future developments include in-cell metrology and integration with other instruments in the same platform.

Linear Optical Quantum Metrology with Single Photons: Exploiting Spontaneously Generated Entanglement to Beat the Shot-Noise Limit

NASA Astrophysics Data System (ADS)

Motes, Keith R.; Olson, Jonathan P.; Rabeaux, Evan J.; Dowling, Jonathan P.; Olson, S. Jay; Rohde, Peter P.

2015-05-01

Quantum number-path entanglement is a resource for supersensitive quantum metrology and in particular provides for sub-shot-noise or even Heisenberg-limited sensitivity. However, such number-path entanglement has been thought to be resource intensive to create in the first place—typically requiring either very strong nonlinearities, or nondeterministic preparation schemes with feedforward, which are difficult to implement. Very recently, arising from the study of quantum random walks with multiphoton walkers, as well as the study of the computational complexity of passive linear optical interferometers fed with single-photon inputs, it has been shown that such passive linear optical devices generate a superexponentially large amount of number-path entanglement. A logical question to ask is whether this entanglement may be exploited for quantum metrology. We answer that question here in the affirmative by showing that a simple, passive, linear-optical interferometer—fed with only uncorrelated, single-photon inputs, coupled with simple, single-mode, disjoint photodetection—is capable of significantly beating the shot-noise limit. Our result implies a pathway forward to practical quantum metrology with readily available technology.

Linear optical quantum metrology with single photons: exploiting spontaneously generated entanglement to beat the shot-noise limit.

PubMed

Motes, Keith R; Olson, Jonathan P; Rabeaux, Evan J; Dowling, Jonathan P; Olson, S Jay; Rohde, Peter P

2015-05-01

Quantum number-path entanglement is a resource for supersensitive quantum metrology and in particular provides for sub-shot-noise or even Heisenberg-limited sensitivity. However, such number-path entanglement has been thought to be resource intensive to create in the first place--typically requiring either very strong nonlinearities, or nondeterministic preparation schemes with feedforward, which are difficult to implement. Very recently, arising from the study of quantum random walks with multiphoton walkers, as well as the study of the computational complexity of passive linear optical interferometers fed with single-photon inputs, it has been shown that such passive linear optical devices generate a superexponentially large amount of number-path entanglement. A logical question to ask is whether this entanglement may be exploited for quantum metrology. We answer that question here in the affirmative by showing that a simple, passive, linear-optical interferometer--fed with only uncorrelated, single-photon inputs, coupled with simple, single-mode, disjoint photodetection--is capable of significantly beating the shot-noise limit. Our result implies a pathway forward to practical quantum metrology with readily available technology.

3D reconstruction of hollow parts analyzing images acquired by a fiberscope

NASA Astrophysics Data System (ADS)

Icasio-Hernández, Octavio; Gonzalez-Barbosa, José-Joel; Hurtado-Ramos, Juan B.; Viliesid-Alonso, Miguel

2014-07-01

A modified fiberscope used to reconstruct difficult-to-reach inner structures is presented. By substituting the fiberscope’s original illumination system, we can project a profile-revealing light line inside the object of study. The light line is obtained using a sandwiched power light-emitting diode (LED) attached to an extension arm on the tip of the fiberscope. Profile images from the interior of the object are then captured by a camera attached to the fiberscope’s eyepiece. Using a series of those images at different positions, the system is capable of generating a 3D reconstruction of the object with submillimeter accuracy. Also proposed is the use of a combination of known filters to remove the honeycomb structures produced by the fiberscope and the use of ring gages to obtain the extrinsic parameters of the camera attached to the fiberscope and the metrological traceability of the system. Several standard ring diameter measurements were compared against their certified values to improve the accuracy of the system. To exemplify an application, a 3D reconstruction of the interior of a refrigerator duct was conducted. This reconstruction includes accuracy assessment by comparing the measurements of the system to a coordinate measuring machine. The system, as described, is capable of 3D reconstruction of the interior of objects with uniform and non-uniform profiles from 10 to 60 mm in transversal dimensions and a depth of 1000 mm if the material of the walls of the object is translucent and allows the detection of the power LED light from the exterior through the wall. If this is not possible, we propose the use of a magnetic scale which reduces the working depth to 170 mm. The assessed accuracy is around ±0.15 mm in 2D cross-section reconstructions and ±1.3 mm in 1D position using a magnetic scale, and ±0.5 mm using a CCD camera.

PGI chicory (Cichorium intybus L.) traceability by means of HRMAS-NMR spectroscopy: a preliminary study.

PubMed

Ritota, Mena; Casciani, Lorena; Valentini, Massimiliano

2013-05-01

Analytical traceability of PGI and PDO foods (Protected Geographical Indication and Protected Denomination Origin respectively) is one of the most challenging tasks of current applied research. Here we proposed a metabolomic approach based on the combination of (1)H high-resolution magic angle spinning-nuclear magnetic resonance (HRMAS-NMR) spectroscopy with multivariate analysis, i.e. PLS-DA, as a reliable tool for the traceability of Italian PGI chicories (Cichorium intybus L.), i.e. Radicchio Rosso di Treviso and Radicchio Variegato di Castelfranco, also known as red and red-spotted, respectively. The metabolic profile was gained by means of HRMAS-NMR, and multivariate data analysis allowed us to build statistical models capable of providing clear discrimination among the two varieties and classification according to the geographical origin. Based on Variable Importance in Projection values, the molecular markers for classifying the different types of red chicories analysed were found accounting for both the cultivar and the place of origin. © 2012 Society of Chemical Industry.

Aperture alignment in autocollimator-based deflectometric profilometers

DOE Office of Scientific and Technical Information (OSTI.GOV)

Geckeler, R. D., E-mail: Ralf.Geckeler@ptb.de; Just, A.; Kranz, O.

2016-05-15

During the last ten years, deflectometric profilometers have become indispensable tools for the precision form measurement of optical surfaces. They have proven to be especially suitable for characterizing beam-shaping optical surfaces for x-ray beamline applications at synchrotrons and free electron lasers. Deflectometric profilometers use surface slope (angle) to assess topography and utilize commercial autocollimators for the contactless slope measurement. To this purpose, the autocollimator beam is deflected by a movable optical square (or pentaprism) towards the surface where a co-moving aperture limits and defines the beam footprint. In this paper, we focus on the precise and reproducible alignment of themore » aperture relative to the autocollimator’s optical axis. Its alignment needs to be maintained while it is scanned across the surface under test. The reproducibility of the autocollimator’s measuring conditions during calibration and during its use in the profilometer is of crucial importance to providing precise and traceable angle metrology. In the first part of the paper, we present the aperture alignment procedure developed at the Advanced Light Source, Lawrence Berkeley National Laboratory, USA, for the use of their deflectometric profilometers. In the second part, we investigate the topic further by providing extensive ray tracing simulations and calibrations of a commercial autocollimator performed at the Physikalisch-Technische Bundesanstalt, Germany, for evaluating the effects of the positioning of the aperture on the autocollimator’s angle response. The investigations which we performed are crucial for reaching fundamental metrological limits in deflectometric profilometry.« less

A primary standard for low-g shock calibration by laser interferometry

NASA Astrophysics Data System (ADS)

Sun, Qiao; Wang, Jian-lin; Hu, Hong-bo

2014-07-01

This paper presents a novel implementation of a primary standard for low-g shock acceleration calibration by laser interferometry based on rigid body collision at National Institute of Metrology, China. The mechanical structure of the standard device and working principles involved in the shock acceleration exciter, laser interferometers and virtual instruments are described. The novel combination of an electromagnetic exciter and a pneumatic exciter as the mechanical power supply of the standard device can deliver a wide range of shock acceleration levels. In addition to polyurethane rubber, two other types of material are investigated to ensure a wide selection of cushioning pads for shock pulse generation, with pulse shapes and data displayed. A heterodyne He-Ne laser interferometer is preferred for its precise and reliable measurement of shock acceleration while a homodyne one serves as a check standard. Some calibration results of a standard acceleration measuring chain are shown in company with the uncertainty evaluation budget. The expanded calibration uncertainty of shock sensitivity of the acceleration measuring chain is 0.8%, k = 2, with the peak acceleration range from 20 to 10 000 m s-2 and pulse duration from 0.5 to 10 ms. This primary shock standard can meet the traceability requirements of shock acceleration from various applications of industries from automobile to civil engineering and therefore is used for piloting the ongoing shock comparison of Technical Committee of Acoustics, Ultrasound and Vibration (TCAUV) of Asia Pacific Metrology Program (APMP), coded as APMP.AUV.V-P1.

Metrological approaches to organic chemical purity: primary reference materials for vitamin D metabolites.

PubMed

Nelson, Michael A; Bedner, Mary; Lang, Brian E; Toman, Blaza; Lippa, Katrice A

2015-11-01

Given the critical role of pure, organic compound primary reference standards used to characterize and certify chemical Certified Reference Materials (CRMs), it is essential that associated mass purity assessments be fit-for-purpose, represented by an appropriate uncertainty interval, and metrologically sound. The mass fraction purities (% g/g) of 25-hydroxyvitamin D (25(OH)D) reference standards used to produce and certify values for clinical vitamin D metabolite CRMs were investigated by multiple orthogonal quantitative measurement techniques. Quantitative (1)H-nuclear magnetic resonance spectroscopy (qNMR) was performed to establish traceability of these materials to the International System of Units (SI) and to directly assess the principal analyte species. The 25(OH)D standards contained volatile and water impurities, as well as structurally-related impurities that are difficult to observe by chromatographic methods or to distinguish from the principal 25(OH)D species by one-dimensional NMR. These impurities have the potential to introduce significant biases to purity investigations in which a limited number of measurands are quantified. Combining complementary information from multiple analytical methods, using both direct and indirect measurement techniques, enabled mitigation of these biases. Purities of 25(OH)D reference standards and associated uncertainties were determined using frequentist and Bayesian statistical models to combine data acquired via qNMR, liquid chromatography with UV absorbance and atmospheric pressure-chemical ionization mass spectrometric detection (LC-UV, LC-ACPI-MS), thermogravimetric analysis (TGA), and Karl Fischer (KF) titration.

Dilution and permeation standards for the generation of NO, NO2 and SO2 calibration gas mixtures

NASA Astrophysics Data System (ADS)

Haerri, H.-P.; Macé, T.; Waldén, J.; Pascale, C.; Niederhauser, B.; Wirtz, K.; Stovcik, V.; Sutour, C.; Couette, J.; Waldén, T.

2017-03-01

The evaluation results of the metrological performance of a dilution and a permeation standard for generating SI-traceable calibration gas mixtures of NO, SO2 and NO2 for ambient air measurements are presented. The composition of the in situ produced reference gas mixtures is calculated from the instantaneous values of the input quantities of the generating standards. In a measurement comparison, the calibration and measurement capabilities of five laboratories were evaluated for the three analytes at limiting amount of substance fractions in ambient air between 20 and 150 nmol mol-1. For the upper generated reference values the target relative uncertainties of  ⩽2% (for NO and SO2) and  ⩽3% (for NO2) for evaluating the laboratory results were fulfilled in 12 out of 13 cases. For the analytical results seven out of nine laboratories met the criteria for the upper values for NO and NO2, for SO2 it was one out of four. From the negative degrees of equivalence of all NO2 comparison results it was supposed that the permeation rate of NO2 through the FEP polymer membrane of the permeator was different in air and N2. Subsequent precision permeation measurements with various carrier gases revealed that the permeation rate of NO2 was  ≈0.8% lower in synthetic air compared to N2. With the corrected NO2 reference values for air the degrees of equivalence of the laboratory results were improved and closer to be symmetrically distributed.

Investigations of interpolation errors of angle encoders for high precision angle metrology

NASA Astrophysics Data System (ADS)

Yandayan, Tanfer; Geckeler, Ralf D.; Just, Andreas; Krause, Michael; Asli Akgoz, S.; Aksulu, Murat; Grubert, Bernd; Watanabe, Tsukasa

2018-06-01

Interpolation errors at small angular scales are caused by the subdivision of the angular interval between adjacent grating lines into smaller intervals when radial gratings are used in angle encoders. They are often a major error source in precision angle metrology and better approaches for determining them at low levels of uncertainty are needed. Extensive investigations of interpolation errors of different angle encoders with various interpolators and interpolation schemes were carried out by adapting the shearing method to the calibration of autocollimators with angle encoders. The results of the laboratories with advanced angle metrology capabilities are presented which were acquired by the use of four different high precision angle encoders/interpolators/rotary tables. State of the art uncertainties down to 1 milliarcsec (5 nrad) were achieved for the determination of the interpolation errors using the shearing method which provides simultaneous access to the angle deviations of the autocollimator and of the angle encoder. Compared to the calibration and measurement capabilities (CMC) of the participants for autocollimators, the use of the shearing technique represents a substantial improvement in the uncertainty by a factor of up to 5 in addition to the precise determination of interpolation errors or their residuals (when compensated). A discussion of the results is carried out in conjunction with the equipment used.

Opportunities for scientists to influence policy: when does radiation metrology matter in development of national policy?

PubMed

Coursey, Bert M

2014-05-01

Accurate measurements of radiation and radioactivity rarely rise to the level of national policy. The things that matter most to ordinary citizens do not normally include questions of science and technology. Citizens are more often concerned with issues close to home relating to commerce, health, safety, security and the environment. When questions of confidence in measurements arise, they are first directed to the ministry that has responsibilities in that area. When the required uncertainty in field measurements challenges the capability of the regulatory authorities, the National Metrology Institute may be asked to develop transfer standards to enhance the capabilities of the ministry with the mission lead. In this paper, we will consider eight instances over the past nine decades in which questions in radiation and radionuclide metrology in the US did rise to the level that they influenced decisions on national policy. These eight examples share some common threads. Radioactivity and ionizing radiation are useful tools in many disciplines, but can often represent potential or perceived threats to health and public safety. When unforeseen applications of radiation arise, or when environmental radioactivity from natural and man-made sources presents a possible health hazard, the radiation metrologists may be called upon to provide the technical underpinning for policy development. © 2013 Published by Elsevier Ltd.

Programmed LWR metrology by multi-techniques approach

NASA Astrophysics Data System (ADS)

Reche, Jérôme; Besacier, Maxime; Gergaud, Patrice; Blancquaert, Yoann; Freychet, Guillaume; Labbaye, Thibault

2018-03-01

Nowadays, roughness control presents a huge challenge for the lithography step. For advanced nodes, this morphological aspect reaches the same order of magnitude than the Critical Dimension. Hence, the control of roughness needs an adapted metrology. In this study, specific samples with designed roughness have been manufactured using e-beam lithography. These samples have been characterized with three different methodologies: CD-SEM, OCD and SAXS. The main goal of the project is to compare the capability of each of these techniques in terms of reliability, type of information obtained, time to obtain the measurements and level of maturity for the industry.

Establishment of the Co-C Eutectic Fixed-Point Cell for Thermocouple Calibrations at NIMT

NASA Astrophysics Data System (ADS)

Ongrai, O.; Elliott, C. J.

2017-08-01

In 2015, NIMT first established a Co-C eutectic temperature reference (fixed-point) cell measurement capability for thermocouple calibration to support the requirements of Thailand's heavy industries and secondary laboratories. The Co-C eutectic fixed-point cell is a facility transferred from NPL, where the design was developed through European and UK national measurement system projects. In this paper, we describe the establishment of a Co-C eutectic fixed-point cell for thermocouple calibration at NIMT. This paper demonstrates achievement of the required furnace uniformity, the Co-C plateau realization and the comparison data between NIMT and NPL Co-C cells by using the same standard Pt/Pd thermocouple, demonstrating traceability. The NIMT measurement capability for noble metal type thermocouples at the new Co-C eutectic fixed point (1324.06°C) is estimated to be within ± 0.60 K (k=2). This meets the needs of Thailand's high-temperature thermocouple users—for which previously there has been no traceable calibration facility.

Nano-metrology: The art of measuring X-ray mirrors with slope errors <100 nrad

DOE Office of Scientific and Technical Information (OSTI.GOV)

Alcock, Simon G., E-mail: simon.alcock@diamond.ac.uk; Nistea, Ioana; Sawhney, Kawal

2016-05-15

We present a comprehensive investigation of the systematic and random errors of the nano-metrology instruments used to characterize synchrotron X-ray optics at Diamond Light Source. With experimental skill and careful analysis, we show that these instruments used in combination are capable of measuring state-of-the-art X-ray mirrors. Examples are provided of how Diamond metrology data have helped to achieve slope errors of <100 nrad for optical systems installed on synchrotron beamlines, including: iterative correction of substrates using ion beam figuring and optimal clamping of monochromator grating blanks in their holders. Simulations demonstrate how random noise from the Diamond-NOM’s autocollimator adds intomore » the overall measured value of the mirror’s slope error, and thus predict how many averaged scans are required to accurately characterize different grades of mirror.« less

Sub-atomic dimensional metrology: developments in the control of x-ray interferometers

NASA Astrophysics Data System (ADS)

Yacoot, Andrew; Kuetgens, Ulrich

2012-07-01

Within the European Metrology Research Programme funded project NANOTRACE, the nonlinearity of the next generation of optical interferometers has been measured using x-ray interferometry. The x-ray interferometer can be regarded as a ruler or translation stage whose graduations or displacement steps are based on the lattice spacing of the crystallographic planes from which the x-rays are diffracted: in this case the graduations are every 192 pm corresponding to the spacing between the (2 2 0) planes in silicon. Precise displacement of the x-ray interferometer's monolithic translation stage in steps corresponding to discrete numbers of x-ray fringes requires servo positioning capability at the picometre level. To achieve this very fine control, a digital control system has been developed which has opened up the potential for advances in metrology using x-ray interferometry that include quadrature counting of x-ray fringes.

MSTAR: an absolute metrology sensor with sub-micron accuracy for space-based applications

NASA Technical Reports Server (NTRS)

Peters, Robert D.; Lay, Oliver P.; Dubovitsky, Serge; Burger, Johan P.; Jeganathan, Muthu

2004-01-01

The MSTAR sensor is a new system for measuring absolute distance, capable of resolving the integer cycle ambiguity of standard interferometers, and making it possible to measure distance with subnanometer accuracy.

YieldStar based reticle 3D measurements and its application

NASA Astrophysics Data System (ADS)

Vaenkatesan, Vidya; Finders, Jo; ten Berge, Peter; Plug, Reinder; Sijben, Anko; Schellekens, Twan; Dillen, Harm; Pocobiej, Wojciech; Jorge, Vasco G.; van Dijck, Jurgen

2016-09-01

YieldStar (YS) is an established ASML-built scatterometer that is capable of measuring wafer Critical Dimension (CD), Overlay and Focus. In a recent work, the application range of YS was extended to measure 3D CD patterns on a reticle (pattern CD, height, Side Wall Angle-SWA). The primary motivation for this study came from imaging studies that indicated a need for measuring and controlling reticle 3D topography. CD scanning electron microscope (CD-SEM), Atomic force microscope (AFM), 3D multiple detector SEM (3D-SEM) are the preferred tools for reticle metrology. While these tools serve the industry well, the current research to the impact of reticle 3D involves extensive costs, logistic challenges and increased reticle lead time. YS provides an attractive alternative as it can measure pattern CD, SWA and height in a single measurement and at high throughput. This work demonstrates the capability of YS as a reticle metrology tool.

High throughput wafer defect monitor for integrated metrology applications in photolithography

NASA Astrophysics Data System (ADS)

Rao, Nagaraja; Kinney, Patrick; Gupta, Anand

2008-03-01

The traditional approach to semiconductor wafer inspection is based on the use of stand-alone metrology tools, which while highly sensitive, are large, expensive and slow, requiring inspection to be performed off-line and on a lot sampling basis. Due to the long cycle times and sparse sampling, the current wafer inspection approach is not suited to rapid detection of process excursions that affect yield. The semiconductor industry is gradually moving towards deploying integrated metrology tools for real-time "monitoring" of product wafers during the manufacturing process. Integrated metrology aims to provide end-users with rapid feedback of problems during the manufacturing process, and the benefit of increased yield, and reduced rework and scrap. The approach of monitoring 100% of the wafers being processed requires some trade-off in sensitivity compared to traditional standalone metrology tools, but not by much. This paper describes a compact, low-cost wafer defect monitor suitable for integrated metrology applications and capable of detecting submicron defects on semiconductor wafers at an inspection rate of about 10 seconds per wafer (or 360 wafers per hour). The wafer monitor uses a whole wafer imaging approach to detect defects on both un-patterned and patterned wafers. Laboratory tests with a prototype system have demonstrated sensitivity down to 0.3 µm on un-patterned wafers and down to 1 µm on patterned wafers, at inspection rates of 10 seconds per wafer. An ideal application for this technology is preventing photolithography defects such as "hot spots" by implementing a wafer backside monitoring step prior to exposing wafers in the lithography step.

Surface slope metrology of highly curved x-ray optics with an interferometric microscope

NASA Astrophysics Data System (ADS)

Gevorkyan, Gevork S.; Centers, Gary; Polonska, Kateryna S.; Nikitin, Sergey M.; Lacey, Ian; Yashchuk, Valeriy V.

2017-09-01

The development of deterministic polishing techniques has given rise to vendors that manufacture high quality threedimensional x-ray optics. The surface metrology on these optics remains a difficult task. For the fabrication, vendors usually use unique surface metrology tools, generally developed on site, that are not available in the optical metrology labs at x-ray facilities. At the Advanced Light Source X-Ray Optics Laboratory, we have developed a rather straightforward interferometric-microscopy-based procedure capable of sub microradian characterization of sagittal slope variation of x-ray optics for two-dimensionally focusing and collimating (such as ellipsoids, paraboloids, etc.). In the paper, we provide the mathematical foundation of the procedure and describe the related instrument calibration. We also present analytical expression describing the ideal surface shape in the sagittal direction of a spheroid specified by the conjugate parameters of the optic's beamline application. The expression is useful when analyzing data obtained with such optics. The high efficiency of the developed measurement and data analysis procedures is demonstrated in results of measurements with a number of x-ray optics with sagittal radius of curvature between 56 mm and 480 mm. We also discuss potential areas of further improvement.

Towards direct realisation of the SI unit of sound pressure in the audible hearing range based on optical free-field acoustic particle measurements

DOE Office of Scientific and Technical Information (OSTI.GOV)

Koukoulas, Triantafillos, E-mail: triantafillos.koukoulas@npl.co.uk; Piper, Ben

Since the introduction of the International System of Units (the SI system) in 1960, weights, measures, standardised approaches, procedures, and protocols have been introduced, adapted, and extensively used. A major international effort and activity concentrate on the definition and traceability of the seven base SI units in terms of fundamental constants, and consequently those units that are derived from the base units. In airborne acoustical metrology and for the audible range of frequencies up to 20 kHz, the SI unit of sound pressure, the pascal, is realised indirectly and without any knowledge or measurement of the sound field. Though themore » principle of reciprocity was originally formulated by Lord Rayleigh nearly two centuries ago, it was devised in the 1940s and eventually became a calibration standard in the 1960s; however, it can only accommodate a limited number of acoustic sensors of specific types and dimensions. International standards determine the device sensitivity either through coupler or through free-field reciprocity but rely on the continuous availability of specific acoustical artefacts. Here, we show an optical method based on gated photon correlation spectroscopy that can measure sound pressures directly and absolutely in fully anechoic conditions, remotely, and without disturbing the propagating sound field. It neither relies on the availability or performance of any measurement artefact nor makes any assumptions of the device geometry and sound field characteristics. Most importantly, the required units of sound pressure and microphone sensitivity may now be experimentally realised, thus providing direct traceability to SI base units.« less

Picometre displacement measurements using a differential Fabry-Perot optical interferometer and an x-ray interferometer

NASA Astrophysics Data System (ADS)

Çelik, Mehmet; Hamid, Ramiz; Kuetgens, Ulrich; Yacoot, Andrew

2012-08-01

X-ray interferometry is emerging as an important tool for dimensional nanometrology both for sub-nanometre measurement and displacement. It has been used to verify the performance of the next generation of displacement measuring optical interferometers within the European Metrology Research Programme project NANOTRACE. Within this project a more detailed set of comparison measurements between the x-ray interferometer and a dual channel Fabry-Perot optical interferometer (DFPI) have been made to demonstrate the capabilities of both instruments for picometre displacement metrology. The results show good agreement between the two instruments, although some minor differences of less than 5 pm have been observed.

A universal quantum module for quantum communication, computation, and metrology

NASA Astrophysics Data System (ADS)

Hanks, Michael; Lo Piparo, Nicolò; Trupke, Michael; Schmiedmayer, Jorg; Munro, William J.; Nemoto, Kae

2017-08-01

In this work, we describe a simple module that could be ubiquitous for quantum information based applications. The basic modules comprises a single NV- center in diamond embedded in an optical cavity, where the cavity mediates interactions between photons and the electron spin (enabling entanglement distribution and efficient readout), while the nuclear spins constitutes a long-lived quantum memories capable of storing and processing quantum information. We discuss how a network of connected modules can be used for distributed metrology, communication and computation applications. Finally, we investigate the possible use of alternative diamond centers (SiV/GeV) within the module and illustrate potential advantages.

Electrical test prediction using hybrid metrology and machine learning

NASA Astrophysics Data System (ADS)

Breton, Mary; Chao, Robin; Muthinti, Gangadhara Raja; de la Peña, Abraham A.; Simon, Jacques; Cepler, Aron J.; Sendelbach, Matthew; Gaudiello, John; Emans, Susan; Shifrin, Michael; Etzioni, Yoav; Urenski, Ronen; Lee, Wei Ti

2017-03-01

Electrical test measurement in the back-end of line (BEOL) is crucial for wafer and die sorting as well as comparing intended process splits. Any in-line, nondestructive technique in the process flow to accurately predict these measurements can significantly improve mean-time-to-detect (MTTD) of defects and improve cycle times for yield and process learning. Measuring after BEOL metallization is commonly done for process control and learning, particularly with scatterometry (also called OCD (Optical Critical Dimension)), which can solve for multiple profile parameters such as metal line height or sidewall angle and does so within patterned regions. This gives scatterometry an advantage over inline microscopy-based techniques, which provide top-down information, since such techniques can be insensitive to sidewall variations hidden under the metal fill of the trench. But when faced with correlation to electrical test measurements that are specific to the BEOL processing, both techniques face the additional challenge of sampling. Microscopy-based techniques are sampling-limited by their small probe size, while scatterometry is traditionally limited (for microprocessors) to scribe targets that mimic device ground rules but are not necessarily designed to be electrically testable. A solution to this sampling challenge lies in a fast reference-based machine learning capability that allows for OCD measurement directly of the electrically-testable structures, even when they are not OCD-compatible. By incorporating such direct OCD measurements, correlation to, and therefore prediction of, resistance of BEOL electrical test structures is significantly improved. Improvements in prediction capability for multiple types of in-die electrically-testable device structures is demonstrated. To further improve the quality of the prediction of the electrical resistance measurements, hybrid metrology using the OCD measurements as well as X-ray metrology (XRF) is used. Hybrid metrology is the practice of combining information from multiple sources in order to enable or improve the measurement of one or more critical parameters. Here, the XRF measurements are used to detect subtle changes in barrier layer composition and thickness that can have second-order effects on the electrical resistance of the test structures. By accounting for such effects with the aid of the X-ray-based measurements, further improvement in the OCD correlation to electrical test measurements is achieved. Using both types of solution incorporation of fast reference-based machine learning on nonOCD-compatible test structures, and hybrid metrology combining OCD with XRF technology improvement in BEOL cycle time learning could be accomplished through improved prediction capability.

DFM flow by using combination between design based metrology system and model based verification at sub-50nm memory device

NASA Astrophysics Data System (ADS)

Kim, Cheol-kyun; Kim, Jungchan; Choi, Jaeseung; Yang, Hyunjo; Yim, Donggyu; Kim, Jinwoong

2007-03-01

As the minimum transistor length is getting smaller, the variation and uniformity of transistor length seriously effect device performance. So, the importance of optical proximity effects correction (OPC) and resolution enhancement technology (RET) cannot be overemphasized. However, OPC process is regarded by some as a necessary evil in device performance. In fact, every group which includes process and design, are interested in whole chip CD variation trend and CD uniformity, which represent real wafer. Recently, design based metrology systems are capable of detecting difference between data base to wafer SEM image. Design based metrology systems are able to extract information of whole chip CD variation. According to the results, OPC abnormality was identified and design feedback items are also disclosed. The other approaches are accomplished on EDA companies, like model based OPC verifications. Model based verification will be done for full chip area by using well-calibrated model. The object of model based verification is the prediction of potential weak point on wafer and fast feed back to OPC and design before reticle fabrication. In order to achieve robust design and sufficient device margin, appropriate combination between design based metrology system and model based verification tools is very important. Therefore, we evaluated design based metrology system and matched model based verification system for optimum combination between two systems. In our study, huge amount of data from wafer results are classified and analyzed by statistical method and classified by OPC feedback and design feedback items. Additionally, novel DFM flow would be proposed by using combination of design based metrology and model based verification tools.

Climate Benchmark Missions: CLARREO

NASA Technical Reports Server (NTRS)

Wielicki, Bruce A.; Young, David F.

2010-01-01

CLARREO (Climate Absolute Radiance and Refractivity Observatory) is one of the four Tier 1 missions recommended by the recent NRC decadal survey report on Earth Science and Applications from Space (NRC, 2007). The CLARREO mission addresses the need to rigorously observe climate change on decade time scales and to use decadal change observations as the most critical method to determine the accuracy of climate change projections such as those used in the Fourth Assessment Report of the Intergovernmental Panel on Climate Change (IPCC AR4). A rigorously known accuracy of both decadal change observations as well as climate projections is critical in order to enable sound policy decisions. The CLARREO mission accomplishes this critical objective through highly accurate and SI traceable decadal change observations sensitive to many of the key uncertainties in climate radiative forcings, responses, and feedbacks that in turn drive uncertainty in current climate model projections. The same uncertainties also lead to uncertainty in attribution of climate change to anthropogenic forcing. The CLARREO breakthrough in decadal climate change observations is to achieve the required levels of accuracy and traceability to SI standards for a set of observations sensitive to a wide range of key decadal change variables. These accuracy levels are determined both by the projected decadal changes as well as by the background natural variability that such signals must be detected against. The accuracy for decadal change traceability to SI standards includes uncertainties of calibration, sampling, and analysis methods. Unlike most other missions, all of the CLARREO requirements are judged not by instantaneous accuracy, but instead by accuracy in large time/space scale average decadal changes. Given the focus on decadal climate change, the NRC Decadal Survey concluded that the single most critical issue for decadal change observations was their lack of accuracy and low confidence in observing the small but critical climate change signals. CLARREO is the recommended attack on this challenge, and builds on the last decade of climate observation advances in the Earth Observing System as well as metrological advances at NIST (National Institute of Standards and Technology) and other standards laboratories.

Investigation of hyper-NA scanner emulation for photomask CDU performance

NASA Astrophysics Data System (ADS)

Poortinga, Eric; Scheruebl, Thomas; Conley, Will; Sundermann, Frank

2007-02-01

As the semiconductor industry moves toward immersion lithography using numerical apertures above 1.0 the quality of the photomask becomes even more crucial. Photomask specifications are driven by the critical dimension (CD) metrology within the wafer fab. Knowledge of the CD values at resist level provides a reliable mechanism for the prediction of device performance. Ultimately, tolerances of device electrical properties drive the wafer linewidth specifications of the lithography group. Staying within this budget is influenced mainly by the scanner settings, resist process, and photomask quality. Tightening of photomask specifications is one mechanism for meeting the wafer CD targets. The challenge lies in determining how photomask level metrology results influence wafer level imaging performance. Can it be inferred that photomask level CD performance is the direct contributor to wafer level CD performance? With respect to phase shift masks, criteria such as phase and transmission control are generally tightened with each technology node. Are there other photomask relevant influences that effect wafer CD performance? A comprehensive study is presented supporting the use of scanner emulation based photomask CD metrology to predict wafer level within chip CD uniformity (CDU). Using scanner emulation with the photomask can provide more accurate wafer level prediction because it inherently includes all contributors to image formation related to the 3D topography such as the physical CD, phase, transmission, sidewall angle, surface roughness, and other material properties. Emulated images from different photomask types were captured to provide CD values across chip. Emulated scanner image measurements were completed using an AIMS TM45-193i with its hyper-NA, through-pellicle data acquisition capability including the Global CDU Map TM software option for AIMS TM tools. The through-pellicle data acquisition capability is an essential prerequisite for capturing final CDU data (after final clean and pellicle mounting) before the photomask ships or for re-qualification at the wafer fab. Data was also collected on these photomasks using a conventional CD-SEM metrology system with the pellicles removed. A comparison was then made to wafer prints demonstrating the benefit of using scanner emulation based photomask CD metrology.

The role of standards in the development and implementation of clinical laboratory tests: a domestic and global perspective.

PubMed

Michaud, Ginette Y

2005-01-01

In the field of clinical laboratory medicine, standardization is aimed at increasing the trueness and reliability of measured values. Standardization relies on the use of written standards, reference measurement procedures and reference materials. These are important tools for the design and validation of new tests, and for establishing the metrological traceability of diagnostic assays. Their use supports the translation of research technologies into new diagnostic assays and leads to more rapid advances in science and medicine, as well as improvements in the quality of patient care. The various standardization tools are described, as are the procedures by which written standards, reference procedures and reference materials are developed. Recent efforts to develop standards for use in the field of molecular diagnostics are discussed. The recognition of standardization tools by the FDA and other regulatory authorities is noted as evidence of their important role in ensuring the safety and performance of in vitro diagnostic devices.

Research on new dynamic force calibration system

NASA Astrophysics Data System (ADS)

Zhang, Li

2008-06-01

Sinusoidal force calibration method based on electrodynamic shaker and interferometric system was studied several years before at Physikalisch-Technische Bundesanstalt (PTB). In that system a load mass are screwed on the top of force transducer, the sinusoidal forces realized by accelerated load masses are traceable to acceleration and mass according to the force definition F(t) = ma(t), where m is the total mass acting on the sensing element of the force transducer and a is the time and spatial-dependent acceleration of the mass, which is directly measured by a laser interferometer. This paper will introduce a new dynamic force calibration system developed at Changcheng Institute of Metrology and Measurement (CIMM). It uses electrodynamic shakers to generate dynamic force in the range from 1N to 20kN, and heterodyne laser interferometers are used for acceleration measurement. A new air bearing system is developed to increase the performance of shakers and an active vibration isolator is used to reduce enviromental disturbance to the interferometric system.

Coordinate alignment of combined measurement systems using a modified common points method

NASA Astrophysics Data System (ADS)

Zhao, G.; Zhang, P.; Xiao, W.

2018-03-01

The co-ordinate metrology has been extensively researched for its outstanding advantages in measurement range and accuracy. The alignment of different measurement systems is usually achieved by integrating local coordinates via common points before measurement. The alignment errors would accumulate and significantly reduce the global accuracy, thus need to be minimized. In this thesis, a modified common points method (MCPM) is proposed to combine different traceable system errors of the cooperating machines, and optimize the global accuracy by introducing mutual geometric constraints. The geometric constraints, obtained by measuring the common points in individual local coordinate systems, provide the possibility to reduce the local measuring uncertainty whereby enhance the global measuring certainty. A simulation system is developed in Matlab to analyze the feature of MCPM using the Monto-Carlo method. An exemplary setup is constructed to verify the feasibility and efficiency of the proposed method associated with laser tracker and indoor iGPS systems. Experimental results show that MCPM could significantly improve the alignment accuracy.

Experimental study on performance verification tests for coordinate measuring systems with optical distance sensors

NASA Astrophysics Data System (ADS)

Carmignato, Simone

2009-01-01

Optical sensors are increasingly used for dimensional and geometrical metrology. However, the lack of international standards for testing optical coordinate measuring systems is currently limiting the traceability of measurements and the easy comparison of different optical systems. This paper presents an experimental investigation on artefacts and procedures for testing coordinate measuring systems equipped with optical distance sensors. The work is aimed at contributing to the standardization of testing methods. The VDI/VDE 2617-6.2:2005 guideline, which is probably the most complete document available at the state of the art for testing systems with optical distance sensors, is examined with specific experiments. Results from the experiments are discussed, with particular reference to the tests used for determining the following characteristics: error of indication for size measurement, probing error and structural resolution. Particular attention is given to the use of artefacts alternative to gauge blocks for determining the error of indication for size measurement.

Thermal neutron calibration channel at LNMRI/IRD.

PubMed

Astuto, A; Salgado, A P; Leite, S P; Patrão, K C S; Fonseca, E S; Pereira, W W; Lopes, R T

2014-10-01

The Brazilian Metrology Laboratory of Ionizing Radiations (LNMRI) standard thermal neutron flux facility was designed to provide uniform neutron fluence for calibration of small neutron detectors and individual dosemeters. This fluence is obtained by neutron moderation from four (241)Am-Be sources, each with 596 GBq, in a facility built with blocks of graphite/paraffin compound and high-purity carbon graphite. This study was carried out in two steps. In the first step, simulations using the MCNPX code on different geometric arrangements of moderator materials and neutron sources were performed. The quality of the resulting neutron fluence in terms of spectrum, cadmium ratio and gamma-neutron ratio was evaluated. In the second step, the system was assembled based on the results obtained on the simulations, and new measurements are being made. These measurements will validate the system, and other intercomparisons will ensure traceability to the International System of Units. © The Author 2014. Published by Oxford University Press. All rights reserved. For Permissions, please email: journals.permissions@oup.com.

IMPROVEMENTS IN THE THERMAL NEUTRON CALIBRATION UNIT, TNF2, AT LNMRI/IRD.

PubMed

Astuto, A; Fernandes, S S; Patrão, K C S; Fonseca, E S; Pereira, W W; Lopes, R T

2018-02-21

The standard thermal neutron flux unit, TNF2, in the Brazilian National Ionizing Radiation Metrology Laboratory was rebuilt. Fluence is still achieved by moderating of four 241Am-Be sources with 0.6 TBq each. The facility was again simulated and redesigned with graphite core and paraffin added graphite blocks surrounding it. Simulations using the MCNPX code on different geometric arrangements of moderator materials and neutron sources were performed. The resulting neutron fluence quality in terms of intensity, spectrum and cadmium ratio was evaluated. After this step, the system was assembled based on the results obtained from the simulations and measurements were performed with equipment existing in LNMRI/IRD and by simulated equipment. This work focuses on the characterization of a central chamber point and external points around the TNF2 in terms of neutron spectrum, fluence and ambient dose equivalent, H*(10). This system was validated with spectra measurements, fluence and H*(10) to ensure traceability.

Measuring Pressure Has a New Standard

NASA Technical Reports Server (NTRS)

2002-01-01

The Force-Balanced Piston Gauge (FPG) tests and calibrates instrumentation operating in the low pressure range. The system provides a traceable, primary calibration standard for measuring pressures in the range of near 0 to 15 kPa (2.2 psi) in both gauge and absolute measurement modes. The hardware combines a large area piston-cylinder with a load cell measuring the force resulting from pressures across the piston. The mass of the piston can be tared out, allowing measurement to start from zero. A pressure higher than the measured pressure, which keeps the piston centered, lubricates an innovative conical gap located between the piston and the cylinder, eliminating the need for piston rotation. A pressure controller based on the control of low gas flow automates the pressure control. DHI markets the FPG as an automated primary standard for very low-gauge and absolute pressures. DHI is selling the FPG to high-end metrology laboratories on a case by case basis, with a full commercial release to follow.

FOREWORD: The 4th CCM International Conference on Pressure Metrology from Ultra-High Vacuum to Very High Pressures (10-9 Pa to 109 Pa)

NASA Astrophysics Data System (ADS)

Legras, Jean-Claude; Jousten, Karl; Severn, Ian

2005-12-01

The fourth CCM (Consultative Committee for Mass and related quantities) International Conference on Pressure Metrology from Ultra-High Vacuum to Very High Pressures (10-9 Pa to 109 Pa) was held at the Institute of Physics in London from 19-21 April 2005. The event, which was organized by the Low, Medium and High Pressure working groups of the CCM, was attended by in excess of one hundred participants with representatives from five continents and every regional metrology organization. The purpose of this conference is to review all the work that is devoted to the highest quality of pressure measurement by primary standards as well as the dissemination of the pressure scale. A total of 52 papers were presented orally, and 26 as posters, in sessions that covered the following topics: Latest scientific advances in pressure and vacuum metrology Innovative transfer standards, advanced sensors and new instrument development Primary (top-level) measurement standards International and regional key comparisons New approaches to calibration It is interesting the note that since the third conference in 1999 the pressure range covered has increased by two orders of magnitude to 109 Pa, to take into account more exacting scientific and industrial demands for traceable vacuum measurement. A further feature of the conference was the increased range of instrumentation and techniques used in the realization and potential realization of pressure standards. Seton Bennett, Director of International Metrology at the National Physical Laboratory, opened the conference and Andrew Wallard, Director of the Bureau International des Poids et Mesures (BIPM), gave the keynote address which described the implementation of the mutual recognition arrangement and the resulting removal of metrological barriers to international trade. Many experts have contributed significant amounts of their time to organize the event and to review the submitted papers. Thanks are due to all of these people, particularly Gianfranco Molinar who offered much advice based on experience of organizing the previous conference. Special thanks must also be made to Mitsuru Tanaka, President of the CCM, and Andrew Wallard, Director of the BIPM, for their support of the event. The event was coordinated by Jasmina Bolfek-Radovani, of the Institute of Physics, without whose tireless efforts the event would not have been as successful. The production of this issue of Metrologia would not have been possible without the help and support of its editor, Jeffrey Williams. The National Measurement System Directorate of the Department of Trade and Industry supported the conference and it was sponsored by DH Instruments and BOC Edwards. Additional financial assistance was also received from Chell Instruments Ltd, DH-Budenberg, GE Infrastructure Sensing, Hi-Pro Pressure Products Ltd, Kurt J Lesker Company Ltd and Leybold Vacuum UK Ltd. Finally we would like to thank all of the conference participants who made the event both technically stimulating and enjoyable. By the time the next CCM Pressure conference is held in Berlin in 2011, pressure science and technology will undoubtedly have moved on still further and we may see the culmination of work to realize primary pressure standards by more fundamental methods.

Final report of the key comparison CCQM-K98: Pb isotope amount ratios in bronze

NASA Astrophysics Data System (ADS)

Vogl, Jochen; Yim, Yong-Hyeon; Lee, Kyoung-Seok; Goenaga-Infante, Heidi; Malinowskiy, Dmitriy; Ren, Tongxiang; Wang, Jun; Vocke, Robert D., Jr.; Murphy, Karen; Nonose, Naoko; Rienitz, Olaf; Noordmann, Janine; Näykki, Teemu; Sara-Aho, Timo; Ari, Betül; Cankur, Oktay

2014-01-01

Isotope amount ratios are proving useful in an ever increasing array of applications that range from studies unravelling transport processes, to pinpointing the provenance of specific samples as well as trace element quantification by using isotope dilution mass spectrometry (IDMS). These expanding applications encompass fields as diverse as archaeology, food chemistry, forensic science, geochemistry, medicine and metrology. However, to be effective tools, the isotope ratio data must be reliable and traceable to enable the comparability of measurement results. The importance of traceability and comparability in isotope ratio analysis has already been recognized by the Inorganic Analysis Working Group (IAWG) within the CCQM. While the requirements for isotope ratio accuracy and precision in the case of IDMS are generally quite modest, 'absolute' Pb isotope ratio measurements for geochemical applications as well as forensic provenance studies require Pb isotope ratio measurements of the highest quality. To support present and future CMCs on isotope ratio determinations, a key comparison was urgently needed and therefore initiated at the IAWG meeting in Paris in April 2011. The analytical task within such a comparison was decided to be the measurement of Pb isotope amount ratios in water and bronze. Measuring Pb isotope amount ratios in an aqueous Pb solution tested the ability of analysts to correct for any instrumental effects on the measured ratios, while the measurement of Pb isotope amount ratios in a metal matrix sample provided a real world test of the whole chemical and instrumental procedure. A suitable bronze material with a Pb mass fraction between 10 and 100 mg•kg-1 and a high purity solution of Pb with a mass fraction of approximately 100 mg•kg-1 was available at the pilot laboratory (BAM), both offering a natural-like Pb isotopic composition. The mandatory measurands, the isotope amount ratios n(206Pb)/n(204Pb), n(207Pb)/n(204Pb) and n(208Pb)/n(204Pb) were selected such that they correspond with those commonly reported in Pb isotopic studies and fully describe the isotopic composition of Pb in the sample. Additionally, the isotope amount ratio n(208Pb)/n(206Pb) was added, as this isotope ratio is typically measured when performing Pb quantitation by IDMS involving a 206Pb spike. Each participant was free to use any method they deemed suitable for measuring the individual isotope ratios. However, the majority of the results were obtained by using muIti-collector ICPMS or TIMS. The key requirements for all analytical procedures were a traceability statement for all results and the establishment of an uncertainty budget meeting a target uncertainty for all ratios of 0.2 %, relative (k=1). Additionally, the use of a Pb-matrix separation procedure was encouraged. The obtained overall result was excellent, demonstrating that the individual results reported by the NMIs/DIs were comparable and compatible for the determination of Pb isotope ratios. MC-ICPMS and MC-TIMS data were consistent with each other and agree to within 0.05 %. The corresponding uncertainties can be considered as realistic uncertainties and mainly range from 0.02 % to 0.08 % (k=1). As stated above isotope ratios are being increasingly used in different fields. Despite the availability and ease of use of new mass spectrometers, the metrology of unbiased isotope ratio measurements remains very challenging. Therefore, further comparisons are urgently needed, and should be designed to also engage scientists outside the NMI/DI community. Possible follow-up studies should focus on isotope ratio and delta measurements important for environmental and technical applications (e.g. B), food traceability and forensics (e.g. H, C, N, O, S and 87Sr/86Sr) or climate change issues (e.g. Li, B, Mg, Ca, Si). Main text. To reach the main text of this paper, click on Final Report. The final report has been peer-reviewed and approved for publication by the CCQM.

Nanoscale reference materials for environmental, health and safety measurements: needs, gaps and opportunities.

PubMed

Stefaniak, Aleksandr B; Hackley, Vincent A; Roebben, Gert; Ehara, Kensei; Hankin, Steve; Postek, Michael T; Lynch, Iseult; Fu, Wei-En; Linsinger, Thomas P J; Thünemann, Andreas F

2013-12-01

The authors critically reviewed published lists of nano-objects and their physico-chemical properties deemed important for risk assessment and discussed metrological challenges associated with the development of nanoscale reference materials (RMs). Five lists were identified that contained 25 (classes of) nano-objects; only four (gold, silicon dioxide, silver, titanium dioxide) appeared on all lists. Twenty-three properties were identified for characterisation; only (specific) surface area appeared on all lists. The key themes that emerged from this review were: 1) various groups have prioritised nano-objects for development as "candidate RMs" with limited consensus; 2) a lack of harmonised terminology hinders accurate description of many nano-object properties; 3) many properties identified for characterisation are ill-defined or qualitative and hence are not metrologically traceable; 4) standardised protocols are critically needed for characterisation of nano-objects as delivered in relevant media and as administered to toxicological models; 5) the measurement processes being used to characterise a nano-object must be understood because instruments may measure a given sample in a different way; 6) appropriate RMs should be used for both accurate instrument calibration and for more general testing purposes (e.g., protocol validation); 7) there is a need to clarify that where RMs are not available, if "(representative) test materials" that lack reference or certified values may be useful for toxicology testing and 8) there is a need for consensus building within the nanotechnology and environmental, health and safety communities to prioritise RM needs and better define the required properties and (physical or chemical) forms of the candidate materials.

The total spectral radiant flux calibration using a spherical spectrometer at National Institute of Metrology China

NASA Astrophysics Data System (ADS)

Zhao, Weiqiang; Liu, Hui; Liu, Jian

2016-11-01

At present day, in the field of lighting the incandescent lamps are phasing out. The solid state lighting products, i.e. LED, and the related market are developing very fast in China for its promising application, due to the energy-saving and the colorful features. For the quality control and the commercial trade purpose, it is highly necessary to measure the optical parameters of LED light sources with a fast, easy and affordable facility. Therefore, more test labs use the spherical spectrometer to measure LED. The quasi- monochrome of LED and the V(lambda) of silicon photodetector mismatch problem is reduced or avoided, because the total spectral radiant flux (TSRF) is measured, and all the optical parameters are calculate from the TSRF. In such a way, the spherical spectrometer calibration requires TSRF standard lamps instead of the traditional total flux standard lamps. National Institute of Metrology China (NIM) has studied and developed the facilities for TSRF measurement and provides related calibration services. This paper shows the TSRF standard lamp calibration procedure using a spherical spectrometer in every-day calibration and its traceable link to the primary SI unit at NIM. The sphere is of 1.5 m diameter, and installed with a spectrometer and a silicon photodetector. It also shows the detail of data process, such as the spectral absorption correction method and the calculation of the result derived from the spectral readings. The TSRF calibration covers the spectra range of 350 nm to 1050 nm, with a measurement uncertainty of 3.6% 1.8% (k=2).

In-die photomask registration and overlay metrology with PROVE using 2D correlation methods

NASA Astrophysics Data System (ADS)

Seidel, D.; Arnz, M.; Beyer, D.

2011-11-01

According to the ITRS roadmap, semiconductor industry drives the 193nm lithography to its limits, using techniques like double exposure, double patterning, mask-source optimization and inverse lithography. For photomask metrology this translates to full in-die measurement capability for registration and critical dimension together with challenging specifications for repeatability and accuracy. Especially, overlay becomes more and more critical and must be ensured on every die. For this, Carl Zeiss SMS has developed the next generation photomask registration and overlay metrology tool PROVE® which serves the 32nm node and below and which is already well established in the market. PROVE® features highly stable hardware components for the stage and environmental control. To ensure in-die measurement capability, sophisticated image analysis methods based on 2D correlations have been developed. In this paper we demonstrate the in-die capability of PROVE® and present corresponding measurement results for shortterm and long-term measurements as well as the attainable accuracy for feature sizes down to 85nm using different illumination modes and mask types. Standard measurement methods based on threshold criteria are compared with the new 2D correlation methods to demonstrate the performance gain of the latter. In addition, mask-to-mask overlay results of typical box-in-frame structures down to 200nm feature size are presented. It is shown, that from overlay measurements a reproducibility budget can be derived that takes into account stage, image analysis and global effects like mask loading and environmental control. The parts of the budget are quantified from measurement results to identify critical error contributions and to focus on the corresponding improvement strategies.

Laser SRS tracker for reverse prototyping tasks

NASA Astrophysics Data System (ADS)

Kolmakov, Egor; Redka, Dmitriy; Grishkanich, Aleksandr; Tsvetkov, Konstantin

2017-10-01

According to the current great interest concerning Large-Scale Metrology applications in many different fields of manufacturing industry, technologies and techniques for dimensional measurement have recently shown a substantial improvement. Ease-of-use, logistic and economic issues, as well as metrological performance, are assuming a more and more important role among system requirements. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of chip and microlasers as radiators on the linear-angular characteristics of existing measurement systems. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of microlasers as radiators on the linear-angular characteristics of existing measurement systems. The system consists of a distributed network-based layout, whose modularity allows to fit differently sized and shaped working volumes by adequately increasing the number of sensing units. Differently from existing spatially distributed metrological instruments, the remote sensor devices are intended to provide embedded data elaboration capabilities, in order to share the overall computational load.

Critical dimensional linewidth calibration using UV microscope and laser interferometry

NASA Astrophysics Data System (ADS)

Li, Qi; Gao, Si-tian; Li, Wei; Lu, Ming-zhen; Zhang, Ming-kai

2013-10-01

In order to calibrate the critical dimensional (CD) uncertainty of lithography masks in semiconductor manufacturing, NIM is building a two dimensional metrological UV microscope which has traceable measurement ability for nanometer linewidths and pitches. The microscope mainly consists of UV light receiving components, piezoelectric ceramics (PZT) driven stage and interferometer calibration framework. In UV light receiving components they include all optical elements on optical path. The UV light originates from Köhler high aperture transmit/reflect illumination sources; then goes through objective lens to UV splitting optical elements; after that, one part of light attains UV camera for large range calibration, the other part of light passes through a three dimensional adjusted pinhole and is collected by PMT for nanoscale scanning. In PZT driven stage, PZT stick actuators with closed loop control are equipped to push/pull a flexural hinge based platform. The platform has a novel designed compound flexural hinges which nest separate X, Y direction moving mechanisms within one layer but avoiding from mutual cross talk, besides this, the hinges also contain leverage structures to amplify moving distance. With these designs, the platform can attain 100 μm displacement ranges as well as 1 nm resolution. In interferometer framework a heterodyne multi-pass interferometer is mounted on the platform, which measures X-Y plane movement and Z axis rotation, through reference mirror mounted on objective lens tube and Zerodur mirror mounted on PZT platform, the displacement is traced back to laser wavelength. When development is finished, the apparatus can offer the capability to calibrate one dimensional linewidths and two dimensional pitches ranging from 200nm to 50μm with expanded uncertainty below 20nm.

Study of μDBO overlay target size reduction for application broadening

NASA Astrophysics Data System (ADS)

Calado, Victor; Dépré, Jérôme; Massacrier, Clément; Tarabrin, Sergey; van Haren, Richard; Dettoni, Florent; Bouyssou, Régis; Dezauzier, Christophe

2018-03-01

With these proceedings we present μ-diffraction-based overlay (μDBO) targets that are well below the currently supported minimum size of 10×10 μm2 . We have been capable of measuring overlay targets as small as 4×4 μm2 with our latest generation YieldStar system. Furthermore we find an excellent precision (TMU < 0.33 nm for 6 × 6 μm2 ) without any compromise on throughput (MAM time < 60 ms). At last a study that compares four generations of YieldStar systems show clearly that the latest generation YieldStar systems is much better capable of reading small overlay targets such that the performance of a 16 × 16 μm2 on an early generation YieldStar 2nd-gen is comparable to that of a 8 × 8 μm2 on the latest YieldStar 5th-gen. This work enables a smaller metrology footprint, more placement flexibility and in-die overlay metrology solutions.

XPS-XRF hybrid metrology enabling FDSOI process

NASA Astrophysics Data System (ADS)

Hossain, Mainul; Subramanian, Ganesh; Triyoso, Dina; Wahl, Jeremy; Mcardle, Timothy; Vaid, Alok; Bello, A. F.; Lee, Wei Ti; Klare, Mark; Kwan, Michael; Pois, Heath; Wang, Ying; Larson, Tom

2016-03-01

Planar fully-depleted silicon-on-insulator (FDSOI) technology potentially offers comparable transistor performance as FinFETs. pFET FDOSI devices are based on a silicon germanium (cSiGe) layer on top of a buried oxide (BOX). Ndoped interfacial layer (IL), high-k (HfO2) layer and the metal gate stacks are then successively built on top of the SiGe layer. In-line metrology is critical in precisely monitoring the thickness and composition of the gate stack and associated underlying layers in order to achieve desired process control. However, any single in-line metrology technique is insufficient to obtain the thickness of IL, high-k, cSiGe layers in addition to Ge% and N-dose in one single measurement. A hybrid approach is therefore needed that combines the capabilities of more than one measurement technique to extract multiple parameters in a given film stack. This paper will discuss the approaches, challenges, and results associated with the first-in-industry implementation of XPS-XRF hybrid metrology for simultaneous detection of high-k thickness, IL thickness, N-dose, cSiGe thickness and %Ge, all in one signal measurement on a FDSOI substrate in a manufacturing fab. Strong correlation to electrical data for one or more of these measured parameters will also be presented, establishing the reliability of this technique.

Digital Phase Meter for a Laser Heterodyne Interferometer

NASA Technical Reports Server (NTRS)

Loya, Frank

2008-01-01

The Digital Phase Meter is based on a modified phase-locked loop. When phase alignment between the reference input and the phase-shifted metrological input is achieved, the loop locks and the phase shift of the digital phase shifter equals the phase difference that one seeks to measure. This digital phase meter is being developed for incorporation into a laser heterodyne interferometer in a metrological apparatus, but could also be adapted to other uses. Relative to prior phase meters of similar capability, including digital ones, this digital phase meter is smaller, less complex, and less expensive. The phase meter has been constructed and tested in the form of a field-programmable gate array (FPGA).

Guest Editorial Precision Surface Metrology

NASA Astrophysics Data System (ADS)

Wyant, James C.

1984-08-01

During the past two decades there have been many changes in precision surface metrology. The introduction of the laser and the large computer during the 1960s and 1970s produced many changes in testing capabilities and requirements. Several commercial interferometers became available in the 1970s, enabling people who were not necessarily experts in interferometry to use interferometers to produce better optics. Since both buyers and sellers could test optics, the quality of the optics manufactured and sold improved greatly. If a person ordered 1/10 wave optics, he would probably get 1/10 wave or better optics; if he got optics of lower quality, he would know it, and he could prove it and return it.

Traceable Dynamic Calibration of Force Transducers by Primary Means

PubMed Central

Vlajic, Nicholas; Chijioke, Ako

2018-01-01

We describe an apparatus for traceable, dynamic calibration of force transducers using harmonic excitation, and report calibration measurements of force transducers using this apparatus. In this system, the force applied to the transducer is produced by the acceleration of an attached mass, and is determined according to Newton’s second law, F = ma. The acceleration is measured by primary means, using laser interferometry. The capabilities of this system are demonstrated by performing dynamic calibrations of two shear-web-type force transducers up to a frequency of 2 kHz, with an expanded uncertainty below 1.2 %. We give an accounting of all significant sources of uncertainty, including a detailed consideration of the effects of dynamic tilting (rocking), which is a leading source of uncertainty in such harmonic force calibration systems. PMID:29887643

A New Approach for Spectroradiometric Calibration Consistency on the Ground and in Space

NASA Technical Reports Server (NTRS)

Heath, Donald F.; Geprgoev. Geprgo

2013-01-01

A Space-based Calibration Transfer Spectroradiometer (SCATS) is combined with a ground calibration spectral albedo radiometric standard which consists of an opaque quartz glass Mie scattering diffuser (MSD) which has very good Lambertian scattering properties in both reflectance and transmittance modes. This system provides the capability for determining long term changes in the spectral albedo calibrations which operate in the solar reflective wavelength region. The spectral albedo calibration would be traceable to the SIRCUS and STARR NIST calibration facilities. The on-orbit radiometric standard is the Sun. The NIST traceable ground spectral albedo calibration is invariant between the ground and on-orbit over the instrument lifetime due to the use of a field of view defining mechanical baffle to differentiate between radiance and irradiance.

Development of at-wavelength metrology for x-ray optics at the ALS

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yashchuk, Valeriy V.; Goldberg, Kenneth A.; Yuan, Sheng

2010-07-09

The comprehensive realization of the exciting advantages of new third- and forth-generation synchrotron radiation light sources requires concomitant development of reflecting and diffractive x-ray optics capable of micro- and nano-focusing, brightness preservation, and super high resolution. The fabrication, tuning, and alignment of the optics are impossible without adequate metrology instrumentation, methods, and techniques. While the accuracy of ex situ optical metrology at the Advanced Light Source (ALS) has reached a state-of-the-art level, wavefront control on beamlines is often limited by environmental and systematic alignment factors, and inadequate in situ feedback. At ALS beamline 5.3.1, we are developing broadly applicable, high-accuracy,more » in situ, at-wavelength wavefront measurement techniques to surpass 100-nrad slope measurement accuracy for Kirkpatrick-Baez (KB) mirrors. The at-wavelength methodology we are developing relies on a series of tests with increasing accuracy and sensitivity. Geometric Hartmann tests, performed with a scanning illuminated sub-aperture determine the wavefront slope across the full mirror aperture. Shearing interferometry techniques use coherent illumination and provide higher sensitivity wavefront measurements. Combining these techniques with high precision optical metrology and experimental methods will enable us to provide in situ setting and alignment of bendable x-ray optics to realize diffraction-limited, sub 50 nm focusing at beamlines. We describe here details of the metrology beamline endstation, the x-ray beam diagnostic system, and original experimental techniques that have already allowed us to precisely set a bendable KB mirror to achieve a focused spot size of 150 nm.« less

Pre-analytical and analytical aspects affecting clinical reliability of plasma glucose results.

PubMed

Pasqualetti, Sara; Braga, Federica; Panteghini, Mauro

2017-07-01

The measurement of plasma glucose (PG) plays a central role in recognizing disturbances in carbohydrate metabolism, with established decision limits that are globally accepted. This requires that PG results are reliable and unequivocally valid no matter where they are obtained. To control the pre-analytical variability of PG and prevent in vitro glycolysis, the use of citrate as rapidly effective glycolysis inhibitor has been proposed. However, the commercial availability of several tubes with studies showing different performance has created confusion among users. Moreover, and more importantly, studies have shown that tubes promptly inhibiting glycolysis give PG results that are significantly higher than tubes containing sodium fluoride only, used in the majority of studies generating the current PG cut-points, with a different clinical classification of subjects. From the analytical point of view, to be equivalent among different measuring systems, PG results should be traceable to a recognized higher-order reference via the implementation of an unbroken metrological hierarchy. In doing this, it is important that manufacturers of measuring systems consider the uncertainty accumulated through the different steps of the selected traceability chain. In particular, PG results should fulfil analytical performance specifications defined to fit the intended clinical application. Since PG has tight homeostatic control, its biological variability may be used to define these limits. Alternatively, given the central diagnostic role of the analyte, an outcome model showing the impact of analytical performance of test on clinical classifications of subjects can be used. Using these specifications, performance assessment studies employing commutable control materials with values assigned by reference procedure have shown that the quality of PG measurements is often far from desirable and that problems are exacerbated using point-of-care devices. Copyright © 2017 The Canadian Society of Clinical Chemists. Published by Elsevier Inc. All rights reserved.

Application of probabilistic modelling for the uncertainty evaluation of alignment measurements of large accelerator magnets assemblies

NASA Astrophysics Data System (ADS)

Doytchinov, I.; Tonnellier, X.; Shore, P.; Nicquevert, B.; Modena, M.; Mainaud Durand, H.

2018-05-01

Micrometric assembly and alignment requirements for future particle accelerators, and especially large assemblies, create the need for accurate uncertainty budgeting of alignment measurements. Measurements and uncertainties have to be accurately stated and traceable, to international standards, for metre-long sized assemblies, in the range of tens of µm. Indeed, these hundreds of assemblies will be produced and measured by several suppliers around the world, and will have to be integrated into a single machine. As part of the PACMAN project at CERN, we proposed and studied a practical application of probabilistic modelling of task-specific alignment uncertainty by applying a simulation by constraints calibration method. Using this method, we calibrated our measurement model using available data from ISO standardised tests (10360 series) for the metrology equipment. We combined this model with reference measurements and analysis of the measured data to quantify the actual specific uncertainty of each alignment measurement procedure. Our methodology was successfully validated against a calibrated and traceable 3D artefact as part of an international inter-laboratory study. The validated models were used to study the expected alignment uncertainty and important sensitivity factors in measuring the shortest and longest of the compact linear collider study assemblies, 0.54 m and 2.1 m respectively. In both cases, the laboratory alignment uncertainty was within the targeted uncertainty budget of 12 µm (68% confidence level). It was found that the remaining uncertainty budget for any additional alignment error compensations, such as the thermal drift error due to variation in machine operation heat load conditions, must be within 8.9 µm and 9.8 µm (68% confidence level) respectively.

The Traceable Radiometry Underpinning Terrestrial and Helio Studies (TRUTHS) mission

NASA Astrophysics Data System (ADS)

Green, Paul D.; Fox, Nigel P.; Lobb, Daniel; Friend, Jonathan

2015-10-01

TRUTHS (Traceable Radiometry Underpinning Terrestrial- and Helio-Studies) is a proposed small satellite mission to enable a space-based climate observing system capable of delivering data of the quality needed to provide the information needed by policy makers to make robust mitigation and adaptation decisions. This is achieved by embedding trust and confidence in the data and derived information (tied to international standards) from both its own measurements and by upgrading the performance and interoperability of other EO platforms, such as the Sentinels by in-flight reference calibration. TRUTHS would provide measurements of incoming (total and spectrally resolved) and global reflected spectrally and spatially (50 m) solar radiation at the 0.3% uncertainty level. These fundamental climate data products can be convolved into the building blocks for many ECVs and EO applications as envisaged by the 2015 ESA science strategy; in a cost effective manner. We describe the scientific drivers for the TRUTHS mission and how the requirements for the climate benchmarking and cross-calibration reference sensor are both complementary and simply implemented, with a small additional complexity on top of heritage calibration schemes. The calibration scheme components and the route to SI-traceable Earth-reflected solar spectral radiance and solar spectral irradiance are described.

Rollout Strategy to Implement Interoperable Traceability in the Seafood Industry.

PubMed

Gooch, Martin; Dent, Benjamin; Sylvia, Gilbert; Cusack, Christopher

2017-08-01

Verifying the accuracy and rigor of data exchanged within and between businesses for the purposes of traceability rests on the existence of effective and efficient interoperable information systems that meet users' needs. Interoperability, particularly given the complexities intrinsic to the seafood industry, requires that the systems used by businesses operating along the supply chain share a common technology architecture that is robust, resilient, and evolves as industry needs change. Technology architectures are developed through engaging industry stakeholders in understanding why an architecture is required, the benefits provided to the industry and individual businesses and supply chains, and how the architecture will translate into practical results. This article begins by reiterating the benefits that the global seafood industry can capture by implementing interoperable chain-length traceability and the reason for basing the architecture on a peer-to-peer networked database concept versus more traditional centralized or linear approaches. A summary of capabilities that already exist within the seafood industry that the proposed architecture uses is discussed; and a strategy for implementing the architecture is presented. The 6-step strategy is presented in the form of a critical path. © 2017 Institute of Food Technologists®.

Enabling CD SEM metrology for 5nm technology node and beyond

NASA Astrophysics Data System (ADS)

Lorusso, Gian Francesco; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Bömmels, Jürgen; Wilson, Christopher J.; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnémont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru

2017-03-01

The CD SEM (Critical Dimension Scanning Electron Microscope) is one of the main tools used to estimate Critical Dimension (CD) in semiconductor manufacturing nowadays, but, as all metrology tools, it will face considerable challenges to keep up with the requirements of the future technology nodes. The root causes of these challenges are not uniquely related to the shrinking CD values, as one might expect, but to the increase in complexity of the devices in terms of morphology and chemical composition as well. In fact, complicated threedimensional device architectures, high aspect ratio features, and wide variety of materials are some of the unavoidable characteristics of the future metrology nodes. This means that, beside an improvement in resolution, it is critical to develop a CD SEM metrology capable of satisfying the specific needs of the devices of the nodes to come, needs that sometimes will have to be addressed through dramatic changes in approach with respect to traditional CD SEM metrology. In this paper, we report on the development of advanced CD SEM metrology at imec on a variety of device platform and processes, for both logic and memories. We discuss newly developed approaches for standard, IIIV, and germanium FinFETs (Fin Field Effect Transistors), for lateral and vertical nanowires (NW), 3D NAND (three-dimensional NAND), STT-MRAM (Spin Transfer Magnetic Torque Random-Access Memory), and ReRAM (Resistive Random Access Memory). Applications for both front-end of line (FEOL) and back-end of line (BEOL) are developed. In terms of process, S/D Epi (Source Drain Epitaxy), SAQP (Self-Aligned Quadruple Patterning), DSA (Dynamic Self-Assembly), and EUVL (Extreme Ultraviolet Lithography) have been used. The work reported here has been performed on Hitachi CG5000, CG6300, and CV5000. In terms of logic, we discuss here the S/D epi defect classification, the metrology optimization for STI (Shallow Trench Isolation) Ge FinFETs, the defectivity of III-V STI FinFETs,, metrology for vertical and horizontal NWs. With respect to memory, we discuss a STT-RAM statistical CD analysis and its comparison to electrical performance, ReRAM metrology for VMCO (Vacancy-modulated conductive oxide) with comparison with electrical performance, 3D NAND ONO (Oxide Nitride Oxide) thickness measurements. In addition, we report on 3D morphological reconstruction using CD SEM in conjunction with FIB (Focused Ion Beam), on optimized BKM (Best Known Methods) development methodologies, and on CD SEM overlay. The large variety of results reported here gives a clear overview of the creative effort put in place to ensure that the critical potential of CD SEM metrology tools is fully enabled for the 5nm node and beyond.

Reference measurement procedure for the determination of electrolytes in human blood via ICP-OES measurement

NASA Astrophysics Data System (ADS)

Grote-Koska, D.; Klauke, R.; Brand, K.; Schumann, G.

2018-04-01

The determination of electrolytes in human body fluids is one of the most frequently performed analyses in clinical routine laboratories. Metrological traceability of measurement results in patient samples is essential and requires the involvement of higher order reference measurement procedures wherever available. Here, the authors present the evaluation of a higher order reference system for the simultaneous determination of K+, Li+, Na+, Ca2+ and Mg2+ in blood serum and plasma. In the same order, the determined measurement performances were as follows: measurement ranges: 0.75 mmol l-1-75.0 mmol l-1, 0.05 mmol l-1-5.00 mmol l-1, 5 mmol l-1-200 mmol l-1, 0.4 mmol l-1-8.0 mmol l-1 and 0.1 mmol l-1-4.0 mmol l-1. Measurement imprecision: CVs were  ⩽1.1% for intra assay investigations and  ⩽1.8% for long term inter assay investigations for all measurands. Excellent accuracy was found testing certified Standard Reference Materials from NIST: SRM 909 (deviations from 0.0% to 1.1%) and SRM 956 (deviations from 0.0% to 1.5%). Intercomparisons with the German Metrology Institute (PTB) revealed differences from 0.1% to 0.8%. Matrix influences and carry over were not detectable. The expanded combined measurement uncertainties for the determination of the reference method values were estimated as  ⩾1.5% (k  =  2) for each measurand. The reference measurement procedure is accredited by the German accreditation body (DAkkS) in association with the German calibration service (DKD) according to ISO 17025 and ISO 15195. Services comprise the certification of calibrators, control materials and samples used in proficiency testing schemes.

Advanced optical imaging platform for CD metrology and defect review on 130-nm to 100-nm node reticles: an overview of preliminary results

NASA Astrophysics Data System (ADS)

Hourd, Andrew C.; Grimshaw, Anthony; Scheuring, Gerd; Gittinger, Christian; Brueck, Hans-Juergen; Chen, Shiuh-Bin; Chen, Parkson W.; Hartmann, Hans; Ordynskyy, Volodymyr; Jonckheere, Rik M.; Philipsen, Vicky; Schaetz, Thomas; Sommer, Karl

2002-08-01

Critical Dimension fidelity continues to be one of the key driving parameters defining photomask quality and printing performance. The present advanced optical CD metrology systems, operating at i-line, will very soon be challenged as viable tools owing to their restricted resolution and measurement linearity impact on the ability to produce repeatable measurements. Alternative measurement technologies such as CD-SEM and -AFM have started to appear, but are also not without tier concerns in the field of reticle CD metrology. This paper introduces a new optical metrology system (MueTec /) operating at DUV wavelength (248nm), which has been specifically designed to meet the resolution and measurement repeatability requirements of reticle manufacture at the 130nm and 100nm nodes. The system is based upon a specially designed mechanical-optical platform for maximum stability and very advanced optical, illumination, alignment and software systems. The at wavelength operation of this system also makes it an ideal platform for defect printability analysis and review. The system is currently part of a European Commission funded assessment project (IST-2000-28086: McD'OR) to develop a testing strategy to verify the system performance, agree on equipment specifications and demonstrate its capability on advanced production reticles - including long-term reliability. It is the preliminary results from this evaluation that are presented here.

APMP Scale Comparison with Three Radiation Thermometers and Six Fixed-Point Blackbodies

NASA Astrophysics Data System (ADS)

Yamada, Y.; Shimizu, Y.; Ishii, J.

2015-08-01

New Asia Pacific Metrology Programme (APMP) comparisons of radiation thermometry standards, APMP TS-11, and -12, have recently been initiated. These new APMP comparisons cover the temperature range from to . Three radiation thermometers with central wavelengths of 1.6 , 0.9 , and 0.65 are the transfer devices for the radiation thermometer scale comparison conducted in the so-called star configuration. In parallel, a compact fixed-point blackbody furnace that houses six types of fixed-point cells of In, Sn, Zn, Al, Ag, and Cu is circulated, again in a star-type comparison, to substantiate fixed-point calibration capabilities. Twelve APMP national metrology institutes are taking part in this endeavor, in which the National Metrology Institute of Japan acts as the pilot. In this article, the comparison scheme is described with emphasis on the features of the transfer devices, i.e., the radiation thermometers and the fixed-point blackbodies. Results of preliminary evaluations of the performance and characteristic of these instruments as well as the evaluation method of the comparison results are presented.

Speed scanning system based on solid-state microchip laser for architectural planning

NASA Astrophysics Data System (ADS)

Redka, Dmitriy; Grishkanich, Alexsandr S.; Kolmakov, Egor; Tsvetkov, Konstantin

2017-10-01

According to the current great interest concerning Large-Scale Metrology applications in many different fields of manufacturing industry, technologies and techniques for dimensional measurement have recently shown a substantial improvement. Ease-of-use, logistic and economic issues, as well as metrological performance, are assuming a more and more important role among system requirements. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of microlasers as radiators on the linear-angular characteristics of existing measurement systems. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of microlasers as radiators on the linear-angular characteristics of existing measurement systems. The system consists of a distributed network-based layout, whose modularity allows to fit differently sized and shaped working volumes by adequately increasing the number of sensing units. Differently from existing spatially distributed metrological instruments, the remote sensor devices are intended to provide embedded data elaboration capabilities, in order to share the overall computational load.

Coordinate measuring system based on microchip lasers for reverse prototyping

NASA Astrophysics Data System (ADS)

Iakovlev, Alexey; Grishkanich, Alexsandr S.; Redka, Dmitriy; Tsvetkov, Konstantin

2017-02-01

According to the current great interest concerning Large-Scale Metrology applications in many different fields of manufacturing industry, technologies and techniques for dimensional measurement have recently shown a substantial improvement. Ease-of-use, logistic and economic issues, as well as metrological performance, are assuming a more and more important role among system requirements. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of chip and microlasers as radiators on the linear-angular characteristics of existing measurement systems. The project is planned to conduct experimental studies aimed at identifying the impact of the application of the basic laws of microlasers as radiators on the linear-angular characteristics of existing measurement systems. The system consists of a distributed network-based layout, whose modularity allows to fit differently sized and shaped working volumes by adequately increasing the number of sensing units. Differently from existing spatially distributed metrological instruments, the remote sensor devices are intended to provide embedded data elaboration capabilities, in order to share the overall computational load.

Achieving optimum diffraction based overlay performance

NASA Astrophysics Data System (ADS)

Leray, Philippe; Laidler, David; Cheng, Shaunee; Coogans, Martyn; Fuchs, Andreas; Ponomarenko, Mariya; van der Schaar, Maurits; Vanoppen, Peter

2010-03-01

Diffraction Based Overlay (DBO) metrology has been shown to have significantly reduced Total Measurement Uncertainty (TMU) compared to Image Based Overlay (IBO), primarily due to having no measurable Tool Induced Shift (TIS). However, the advantages of having no measurable TIS can be outweighed by increased susceptibility to WIS (Wafer Induced Shift) caused by target damage, process non-uniformities and variations. The path to optimum DBO performance lies in having well characterized metrology targets, which are insensitive to process non-uniformities and variations, in combination with optimized recipes which take advantage of advanced DBO designs. In this work we examine the impact of different degrees of process non-uniformity and target damage on DBO measurement gratings and study their impact on overlay measurement accuracy and precision. Multiple wavelength and dual polarization scatterometry are used to characterize the DBO design performance over the range of process variation. In conclusion, we describe the robustness of DBO metrology to target damage and show how to exploit the measurement capability of a multiple wavelength, dual polarization scatterometry tool to ensure the required measurement accuracy for current and future technology nodes.

Complex EUV imaging reflectometry: spatially resolved 3D composition determination and dopant profiling with a tabletop 13nm source

NASA Astrophysics Data System (ADS)

Porter, Christina L.; Tanksalvala, Michael; Gerrity, Michael; Miley, Galen P.; Esashi, Yuka; Horiguchi, Naoto; Zhang, Xiaoshi; Bevis, Charles S.; Karl, Robert; Johnsen, Peter; Adams, Daniel E.; Kapteyn, Henry C.; Murnane, Margaret M.

2018-03-01

With increasingly 3D devices becoming the norm, there is a growing need in the semiconductor industry and in materials science for high spatial resolution, non-destructive metrology techniques capable of determining depth-dependent composition information on devices. We present a solution to this problem using ptychographic coherent diffractive imaging (CDI) implemented using a commercially available, tabletop 13 nm source. We present the design, simulations, and preliminary results from our new complex EUV imaging reflectometer, which uses coherent 13 nm light produced by tabletop high harmonic generation. This tool is capable of determining spatially-resolved composition vs. depth profiles for samples by recording ptychographic images at multiple incidence angles. By harnessing phase measurements, we can locally and nondestructively determine quantities such as device and thin film layer thicknesses, surface roughness, interface quality, and dopant concentration profiles. Using this advanced imaging reflectometer, we can quantitatively characterize materials-sciencerelevant and industry-relevant nanostructures for a wide variety of applications, spanning from defect and overlay metrology to the development and optimization of nano-enhanced thermoelectric or spintronic devices.

Preliminary results for mask metrology using spatial heterodyne interferometry

NASA Astrophysics Data System (ADS)

Bingham, Philip R.; Tobin, Kenneth; Bennett, Marylyn H.; Marmillion, Pat

2003-12-01

Spatial heterodyne interferometry (SHI) is an imaging technique that captures both the phase and amplitude of a complex wavefront in a single high-speed image. This technology was developed at the Oak Ridge National Laboratory (ORNL) and is currently being implemented for semiconductor wafer inspection by nLine Corporation. As with any system that measures phase, metrology and inspection of surface structures is possible by capturing a wavefront reflected from the surface. The interpretation of surface structure heights for metrology applications can become very difficult with the many layers of various materials used on semiconductor wafers, so inspection (defect detection) has been the primary focus for semiconductor wafers. However, masks used for photolithography typically only contain a couple well-defined materials opening the doors to high-speed mask metrology in 3 dimensions in addition to inspection. Phase shift masks often contain structures etched out of the transparent substrate material for phase shifting. While these structures are difficult to inspect using only intensity, the phase and amplitude images captured with SHI can produce very good resolution of these structures. The phase images also provide depth information that is crucial for these phase shift regions. Preliminary testing has been performed to determine the feasibility of SHI for high-speed non-contact mask metrology using a prototype SHI system with 532 nm wavelength illumination named the Visible Alpha Tool (VAT). These results show that prototype SHI system is capable of performing critical dimension measurements on 400nm lines with a repeatability of 1.4nm and line height measurements with a repeatability of 0.26nm. Additionally initial imaging of an alternating aperture phase shift mask has shown the ability of SHI to discriminate between typical phase shift heights.

Clean focus, dose and CD metrology for CD uniformity improvement

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, DongYoung; Oh, Eungryong; Choi, Ahlin; Kim, Nakyoon; Robinson, John C.; Mengel, Markus; Pablo, Rovira; Yoo, Sungchul; Getin, Raphael; Choi, Dongsub; Jeon, Sanghuck

2018-03-01

Lithography process control solutions require more exacting capabilities as the semiconductor industry goes forward to the 1x nm node DRAM device manufacturing. In order to continue scaling down the device feature sizes, critical dimension (CD) uniformity requires continuous improvement to meet the required CD error budget. In this study we investigate using optical measurement technology to improve over CD-SEM methods in focus, dose, and CD. One of the key challenges is measuring scanner focus of device patterns. There are focus measurement methods based on specially designed marks on scribe-line, however, one issue of this approach is that it will report focus of scribe line which is potentially different from that of the real device pattern. In addition, scribe-line marks require additional design and troubleshooting steps that add complexity. In this study, we investigated focus measurement directly on the device pattern. Dose control is typically based on using the linear correlation behavior between dose and CD. The noise of CD measurement, based on CD-SEM for example, will not only impact the accuracy, but also will make it difficult to monitor dose signature on product wafers. In this study we will report the direct dose metrology result using an optical metrology system which especially enhances the DUV spectral coverage to improve the signal to noise ratio. CD-SEM is often used to measure CD after the lithography step. This measurement approach has the advantage of easy recipe setup as well as the flexibility to measure critical feature dimensions, however, we observe that CD-SEM metrology has limitations. In this study, we demonstrate within-field CD uniformity improvement through the extraction of clean scanner slit and scan CD behavior by using optical metrology.

Preparation and certification of hijiki reference material, NMIJ CRM 7405-a, from the edible marine algae hijiki (Hizikia fusiforme).

PubMed

Narukawa, Tomohiro; Inagaki, Kazumi; Zhu, Yanbei; Kuroiwa, Takayoshi; Narushima, Izumi; Chiba, Koichi; Hioki, Akiharu

2012-02-01

A certified reference material, NMIJ CRM 7405-a, for the determination of trace elements and As(V) in algae was developed from the edible marine hijiki (Hizikia fusiforme) and certified by the National Metrology Institute of Japan (NMIJ), the National Institute of Advanced Industrial Science and Technology (AIST). Hijiki was collected from the Pacific coast in the Kanto area of Japan, and was washed, dried, powdered, and homogenized. The hijiki powder was placed in 400 bottles (ca. 20 g each). The concentrations of 18 trace elements and As(V) were determined by two to four independent analytical techniques, including (ID)ICP-(HR)MS, ICP-OES, GFAAS, and HPLC-ICP-MS using calibration solutions prepared from the elemental standard solution of Japan calibration service system (JCSS) and the NMIJ CRM As(V) solution, and whose concentrations are certified and SI traceable. The uncertainties of all the measurements and preparation procedures were evaluated. The values of 18 trace elements and As(V) in the CRM were certified with uncertainty (k = 2).

A coherent fiber link for very long baseline interferometry.

PubMed

Clivati, Cecilia; Costanzo, Giovanni A; Frittelli, Matteo; Levi, Filippo; Mura, Alberto; Zucco, Massimo; Ambrosini, Roberto; Bortolotti, Claudio; Perini, Federico; Roma, Mauro; Calonico, Davide

2015-11-01

We realize a coherent fiber link for application in very long baseline interferometry (VLBI) for radio astronomy and geodesy. A 550-km optical fiber connects the Italian National Metrological Institute (INRIM) to a radio telescope in Italy and is used for the primary Cs fountain clock stability and accuracy dissemination. We use an ultrastable laser frequency- referenced to the primary standard as a transfer oscillator; at the radio telescope, an RF signal is generated from the laser by using an optical frequency comb. This scheme now provides the traceability of the local maser to the SI second, realized by the Cs fountain at the 1.7 × 10(-16) accuracy. The fiber link never limits the experiment and is robust enough to sustain radio astronomical campaigns. This experiment opens the possibility of replacing the local hydrogen masers at the VLBI sites with optically-synthesized RF signals. This could improve VLBI resolution by providing more accurate and stable frequency references and, in perspective, by enabling common- clock VLBI based on a network of telescopes connected by fiber links.

System for Measuring Flexing of a Large Spaceborne Structure

NASA Technical Reports Server (NTRS)

Scharf, Daniel; Kuhnert, Andreas; Kovalik, Joseph; Hadaegh, Fred; Shaddock, Daniel

2008-01-01

An optoelectronic metrology system is used for determining the attitude and flexing of a large spaceborne radar antenna or similar structure. The measurements are needed for accurate pointing of the antenna and correction and control of the phase of the radar signal wavefront. The system includes a dual-field-of-view star tracker; a laser ranging unit (LRU) and a position-sensitive-detector (PSD)-based camera mounted on an optical bench; and fiducial targets at various locations on the structure. The fiducial targets are illuminated in sequence by laser light coupled via optical fibers. The LRU and the PSD provide measurements of the position of each fiducial target in a reference frame attached to the optical bench. During routine operation, the star tracker utilizes one field of view and functions conventionally to determine the orientation of the optical bench. During operation in a calibration mode, the star tracker also utilizes its second field of view, which includes stars that are imaged alongside some of the fiducial targets in the PSD; in this mode, the PSD measurements are traceable to star measurements.

Measurements of thermophysical properties of solids at the Institute VINČA

DOE Office of Scientific and Technical Information (OSTI.GOV)

Milošević, Nenad, E-mail: nenadm@vinca.rs; Stepanić, Nenad, E-mail: nenad.s@vinca.rs; Terzić, Marijana, E-mail: marijanab@vinca.rs

2016-07-07

This paper presents the Metrological Laboratory for Thermophysical Quantities (MLTV) and its actual measurement possibilities. The MLTV is located in the Department of Thermal Engineering and Energy of the Institute of Nuclear Sciences VINČA in Serbia. It was founded in 1963, accredited by the National Accreditation Body in 2007 and became the national designated laboratory for thermophysical quantities and received the status of a EURAMET Associate Member in 2015. Today, the laboratory develops, maintains and disseminates traceability of different national standards, such as those for thermal conductivity of insulations and poorly conductive solid materials from 250 K to 350 K,more » thermal diffusivity of a large variety of solid materials from 200 K to 1450 K and specific heat and specific electrical resistivity from 250 K to 2400 K of electroconductive solid materials. Total hemispherical and spectral normal emissivity from 1200 K to 2400 K of electroconductive solid materials are also measured in the MLTV. The methods and experimental setups for the realization and measurement of all of these standards and quantities are described with corresponding examples.« less

Model-Based Infrared Metrology for Advanced Technology Nodes and 300 mm Wafer Processing

NASA Astrophysics Data System (ADS)

Rosenthal, Peter A.; Duran, Carlos; Tower, Josh; Mazurenko, Alex; Mantz, Ulrich; Weidner, Peter; Kasic, Alexander

2005-09-01

The use of infrared spectroscopy for production semiconductor process monitoring has evolved recently from primarily unpatterned, i.e. blanket test wafer measurements in a limited historical application space of blanket epitaxial, BPSG, and FSG layers to new applications involving patterned product wafer measurements, and new measurement capabilities. Over the last several years, the semiconductor industry has adopted a new set of materials associated with copper/low-k interconnects, and new structures incorporating exotic materials including silicon germanium, SOI substrates and high aspect ratio trenches. The new device architectures and more chemically sophisticated materials have raised new process control and metrology challenges that are not addressed by current measurement technology. To address the challenges we have developed a new infrared metrology tool designed for emerging semiconductor production processes, in a package compatible with modern production and R&D environments. The tool incorporates recent advances in reflectance instrumentation including highly accurate signal processing, optimized reflectometry optics, and model-based calibration and analysis algorithms. To meet the production requirements of the modern automated fab, the measurement hardware has been integrated with a fully automated 300 mm platform incorporating front opening unified pod (FOUP) interfaces, automated pattern recognition and high throughput ultra clean robotics. The tool employs a suite of automated dispersion-model analysis algorithms capable of extracting a variety of layer properties from measured spectra. The new tool provides excellent measurement precision, tool matching, and a platform for deploying many new production and development applications. In this paper we will explore the use of model based infrared analysis as a tool for characterizing novel bottle capacitor structures employed in high density dynamic random access memory (DRAM) chips. We will explore the capability of the tool for characterizing multiple geometric parameters associated with the manufacturing process that are important to the yield and performance of advanced bottle DRAM devices.

Improved shallow trench isolation and gate process control using scatterometry based metrology

NASA Astrophysics Data System (ADS)

Rudolph, P.; Bradford, S. M.

2005-05-01

The ability to control critical dimensions of structures on semiconductor devices is essential to improving die yield and device performance. As geometries shrink, accuracy of the metrology equipment has increasingly become a contributing factor to the inability to detect shifts which result in yield loss. Scatterometry provides optical measurement that better enables process control of critical dimensions. Superior precision, accuracy, and higher throughput can be achieved more cost effectively through the use of this technology in production facilities. This paper outlines the implementation of Scatterometry based metrology in a production facility. The accuracy advantage it has over conventional Scanning Electron Microscope (SEM) measurement is presented. The Scatterometry tool used has demonstrated repeatability on the order of 3σ < 1 nm at STI-Etch-FICD for CD and Trench Depth (TD), and Side Wall Angle (SWA) measurements to within 0.1 degrees. Poly CD also shows 3σ < 1 nm, and poly thickness measurement 3σ < 2.5 Å. Scatterometry has capabilities which include measurement of CD, structure height and trench depth, Sidewall angle (SWA), and film thickness. The greater accuracy and the addition of in-situ Trench depth and sidewall angle have provided new measurement capabilities. There are inherent difficulties in implementing scatterometry in production wafer fabs. Difficulties with photo resist measurements, film characterization and stack set-up will be discussed. In addition, there are challenges due to the quantity data generated, in how to organize and store this data effectively. A comparison of the advantages and shortcomings of the method are presented.

Advanced Mirror Technology Development (AMTD) for Very Large Space Telescopes

NASA Technical Reports Server (NTRS)

Stahl, H. Philip

2013-01-01

Accomplishments include: Assembled outstanding team from academia, industry and government with expertise in science and space telescope engineering. Derived engineering specifications for monolithic primary mirror from science measurement needs & implementation constraints. Pursuing long-term strategy to mature technologies necessary to enable future large aperture space telescopes. Successfully demonstrated capability to make 0.5 m deep mirror substrate and polish it to UVOIR traceable figure specification.

Traceability of On-Machine Tool Measurement: A Review.

PubMed

Mutilba, Unai; Gomez-Acedo, Eneko; Kortaberria, Gorka; Olarra, Aitor; Yagüe-Fabra, Jose A

2017-07-11

Nowadays, errors during the manufacturing process of high value components are not acceptable in driving industries such as energy and transportation. Sectors such as aerospace, automotive, shipbuilding, nuclear power, large science facilities or wind power need complex and accurate components that demand close measurements and fast feedback into their manufacturing processes. New measuring technologies are already available in machine tools, including integrated touch probes and fast interface capabilities. They provide the possibility to measure the workpiece in-machine during or after its manufacture, maintaining the original setup of the workpiece and avoiding the manufacturing process from being interrupted to transport the workpiece to a measuring position. However, the traceability of the measurement process on a machine tool is not ensured yet and measurement data is still not fully reliable enough for process control or product validation. The scientific objective is to determine the uncertainty on a machine tool measurement and, therefore, convert it into a machine integrated traceable measuring process. For that purpose, an error budget should consider error sources such as the machine tools, components under measurement and the interactions between both of them. This paper reviews all those uncertainty sources, being mainly focused on those related to the machine tool, either on the process of geometric error assessment of the machine or on the technology employed to probe the measurand.

Modeling and Implementation of Cattle/Beef Supply Chain Traceability Using a Distributed RFID-Based Framework in China.

PubMed

Liang, Wanjie; Cao, Jing; Fan, Yan; Zhu, Kefeng; Dai, Qiwei

2015-01-01

In recent years, traceability systems have been developed as effective tools for improving the transparency of supply chains, thereby guaranteeing the quality and safety of food products. In this study, we proposed a cattle/beef supply chain traceability model and a traceability system based on radio frequency identification (RFID) technology and the EPCglobal network. First of all, the transformations of traceability units were defined and analyzed throughout the cattle/beef chain. Secondly, we described the internal and external traceability information acquisition, transformation, and transmission processes throughout the beef supply chain in detail, and explained a methodology for modeling traceability information using the electronic product code information service (EPCIS) framework. Then, the traceability system was implemented based on Fosstrak and FreePastry software packages, and animal ear tag code and electronic product code (EPC) were employed to identify traceability units. Finally, a cattle/beef supply chain included breeding business, slaughter and processing business, distribution business and sales outlet was used as a case study to evaluate the beef supply chain traceability system. The results demonstrated that the major advantages of the traceability system are the effective sharing of information among business and the gapless traceability of the cattle/beef supply chain.

Modeling and Implementation of Cattle/Beef Supply Chain Traceability Using a Distributed RFID-Based Framework in China

PubMed Central

Liang, Wanjie; Cao, Jing; Fan, Yan; Zhu, Kefeng; Dai, Qiwei

2015-01-01

In recent years, traceability systems have been developed as effective tools for improving the transparency of supply chains, thereby guaranteeing the quality and safety of food products. In this study, we proposed a cattle/beef supply chain traceability model and a traceability system based on radio frequency identification (RFID) technology and the EPCglobal network. First of all, the transformations of traceability units were defined and analyzed throughout the cattle/beef chain. Secondly, we described the internal and external traceability information acquisition, transformation, and transmission processes throughout the beef supply chain in detail, and explained a methodology for modeling traceability information using the electronic product code information service (EPCIS) framework. Then, the traceability system was implemented based on Fosstrak and FreePastry software packages, and animal ear tag code and electronic product code (EPC) were employed to identify traceability units. Finally, a cattle/beef supply chain included breeding business, slaughter and processing business, distribution business and sales outlet was used as a case study to evaluate the beef supply chain traceability system. The results demonstrated that the major advantages of the traceability system are the effective sharing of information among business and the gapless traceability of the cattle/beef supply chain. PMID:26431340

A laser tracking dynamic robot metrology instrument

NASA Technical Reports Server (NTRS)

Parker, G. A.; Mayer, J. R. R.

1989-01-01

Research work over several years has resulted in the development of a laser tracking instrument capable of dynamic 3-D measurements of robot end-effector trajectories. The instrument characteristics and experiments to measure the static and dynamic performance of a robot in an industrial manufacturing environment are described. The use of this technology for space applications is examined.

Enabling optical metrology on small 5×5μm2 in-cell targets to support flexible sampling and higher order overlay and CD control for advanced logic devices nodes

NASA Astrophysics Data System (ADS)

Salerno, Antonio; de la Fuente, Isabel; Hsu, Zack; Tai, Alan; Chang, Hammer; McNamara, Elliott; Cramer, Hugo; Li, Daoping

2018-03-01

In next generation Logic devices, overlay control requirements shrink to sub 2.5nm level on-product overlay. Historically on-product overlay has been defined by the overlay capability of after-develop in-scribe targets. However, due to design and dimension, the after development metrology targets are not completely representative for the final overlay of the device. In addition, they are confined to the scribe-lane area, which limits the sampling possibilities. To address these two issues, metrology on structures matching the device structure and which can be sampled with high density across the device is required. Conventional after-etch CDSEM techniques on logic devices present difficulties in discerning the layers of interest, potential destructive charging effects and finally, they are limited by the long measurement times[1] [2] [3] . All together, limit the sampling densities and making CDSEM less attractive for control applications. Optical metrology can overcome most of these limitations. Such measurement, however, does require repetitive structures. This requirement is not fulfilled by logic devices, as the features vary in pitch and CD over the exposure field. The solution is to use small targets, with a maximum pad size of 5x5um2 , which can easily be placed in the logic cell area. These targets share the process and architecture of the device features of interest, but with a modified design that replicates as close as possible the device layout, allowing for in-device metrology for both CD and Overlay. This solution enables measuring closer to the actual product feature location and, not being limited to scribe-lanes, it opens the possibility of higher-density sampling schemes across the field. In summary, these targets become the facilitator of in-device metrology (IDM), that is, enabling the measurements both in-device Overlay and the CD parameters of interest and can deliver accurate, high-throughput, dense and after-etch measurements for Logic. Overlay improvements derived from a high-densely sampled Overlay map measured with 5x5 um2 In Device Metrology (IDM) targets were investigated on a customer Logic application. In this work we present both the main design aspects of the 5x5 um2 IDM targets, as well as the results on the improved Overlay performance.

Machine learning and predictive data analytics enabling metrology and process control in IC fabrication

NASA Astrophysics Data System (ADS)

Rana, Narender; Zhang, Yunlin; Wall, Donald; Dirahoui, Bachir; Bailey, Todd C.

2015-03-01

Integrate circuit (IC) technology is going through multiple changes in terms of patterning techniques (multiple patterning, EUV and DSA), device architectures (FinFET, nanowire, graphene) and patterning scale (few nanometers). These changes require tight controls on processes and measurements to achieve the required device performance, and challenge the metrology and process control in terms of capability and quality. Multivariate data with complex nonlinear trends and correlations generally cannot be described well by mathematical or parametric models but can be relatively easily learned by computing machines and used to predict or extrapolate. This paper introduces the predictive metrology approach which has been applied to three different applications. Machine learning and predictive analytics have been leveraged to accurately predict dimensions of EUV resist patterns down to 18 nm half pitch leveraging resist shrinkage patterns. These patterns could not be directly and accurately measured due to metrology tool limitations. Machine learning has also been applied to predict the electrical performance early in the process pipeline for deep trench capacitance and metal line resistance. As the wafer goes through various processes its associated cost multiplies. It may take days to weeks to get the electrical performance readout. Predicting the electrical performance early on can be very valuable in enabling timely actionable decision such as rework, scrap, feedforward, feedback predicted information or information derived from prediction to improve or monitor processes. This paper provides a general overview of machine learning and advanced analytics application in the advanced semiconductor development and manufacturing.

Computer aided manufacturing for complex freeform optics

NASA Astrophysics Data System (ADS)

Wolfs, Franciscus; Fess, Ed; Johns, Dustin; LePage, Gabriel; Matthews, Greg

2017-10-01

Recently, the desire to use freeform optics has been increasing. Freeform optics can be used to expand the capabilities of optical systems and reduce the number of optics needed in an assembly. The traits that increase optical performance also present challenges in manufacturing. As tolerances on freeform optics become more stringent, it is necessary to continue to improve methods for how the grinding and polishing processes interact with metrology. To create these complex shapes, OptiPro has developed a computer aided manufacturing package called PROSurf. PROSurf generates tool paths required for grinding and polishing freeform optics with multiple axes of motion. It also uses metrology feedback for deterministic corrections. ProSurf handles 2 key aspects of the manufacturing process that most other CAM systems struggle with. The first is having the ability to support several input types (equations, CAD models, point clouds) and still be able to create a uniform high-density surface map useable for generating a smooth tool path. The second is to improve the accuracy of mapping a metrology file to the part surface. To perform this OptiPro is using 3D error maps instead of traditional 2D maps. The metrology error map drives the tool path adjustment applied during processing. For grinding, the error map adjusts the tool position to compensate for repeatable system error. For polishing, the error map drives the relative dwell times of the tool across the part surface. This paper will present the challenges associated with these issues and solutions that we have created.

A three-fingered, touch-sensitive, metrological micro-robotic assembly tool

NASA Astrophysics Data System (ADS)

Torralba, Marta; Hastings, D. J.; Thousand, Jeffery D.; Nowakowski, Bartosz K.; Smith, Stuart T.

2015-12-01

This article describes a metrological, robotic hand to manipulate and measure micrometer size objects. The presented work demonstrates not only assembly operations, but also positioning control and metrology capability. Sample motion is achieved by a commercial positioning stage, which provides XYZ-displacements for assembly of components. A designed and manufactured gripper tool that incorporates 21 degrees-of-freedom for independent alignment of actuators, sensors, and the three fingers of this hand is presented. These fingers can be opened and closed by piezoelectric actuators through levered flexures providing an 80 μm displacement range measured with calibrated opto-interrupter based, knife-edge sensors. The operational ends of the fingers comprise of a quartz tuning fork with a 7 μm diameter 3.2 mm long carbon fiber extending from the end of one tuning fork tine. Finger-tip force-sensing is achieved by the monitoring of individual finger resonances typically at around 32 kHz. Experimental results included are focused on probe performance analysis. Pick and place operation using the three fingers is demonstrated with all fingers being continuously oscillated, a capability not possible with the previous single or two finger tweezer type designs. By monitoring electrical feedback during pick and place operations, changes in the response of the three probes demonstrate the ability to identify both grab and release operations. Component metrology has been assessed by contacting different micro-spheres of diameters 50(±7.5) μm, 135(±20) μm, and 140(±20) μm. These were measured by the micro robot to have diameters of 67, 133, and 126 μm respectively with corresponding deviations of 4.2, 4.9, and 4.3 μm. This deviation in the measured results was primarily due to the manual, joystick-based, contacting of the fingers, difficulties associated with centering the components to the axis of the hand, and lower contact sensitivity for the smallest sphere. Finally, assemblies of spheres onto the edge of a razor blade plus assembly of spherical contact probes for micro-meter scale coordinate measurement applications are presented.

A novel patterning control strategy based on real-time fingerprint recognition and adaptive wafer level scanner optimization

NASA Astrophysics Data System (ADS)

Cekli, Hakki Ergun; Nije, Jelle; Ypma, Alexander; Bastani, Vahid; Sonntag, Dag; Niesing, Henk; Zhang, Linmiao; Ullah, Zakir; Subramony, Venky; Somasundaram, Ravin; Susanto, William; Matsunobu, Masazumi; Johnson, Jeff; Tabery, Cyrus; Lin, Chenxi; Zou, Yi

2018-03-01

In addition to lithography process and equipment induced variations, processes like etching, annealing, film deposition and planarization exhibit variations, each having their own intrinsic characteristics and leaving an effect, a `fingerprint', on the wafers. With ever tighter requirements for CD and overlay, controlling these process induced variations is both increasingly important and increasingly challenging in advanced integrated circuit (IC) manufacturing. For example, the on-product overlay (OPO) requirement for future nodes is approaching <3nm, requiring the allowable budget for process induced variance to become extremely small. Process variance control is seen as an bottleneck to further shrink which drives the need for more sophisticated process control strategies. In this context we developed a novel `computational process control strategy' which provides the capability of proactive control of each individual wafer with aim to maximize the yield, without introducing a significant impact on metrology requirements, cycle time or productivity. The complexity of the wafer process is approached by characterizing the full wafer stack building a fingerprint library containing key patterning performance parameters like Overlay, Focus, etc. Historical wafer metrology is decomposed into dominant fingerprints using Principal Component Analysis. By associating observed fingerprints with their origin e.g. process steps, tools and variables, we can give an inline assessment of the strength and origin of the fingerprints on every wafer. Once the fingerprint library is established, a wafer specific fingerprint correction recipes can be determined based on its processing history. Data science techniques are used in real-time to ensure that the library is adaptive. To realize this concept, ASML TWINSCAN scanners play a vital role with their on-board full wafer detection and exposure correction capabilities. High density metrology data is created by the scanner for each wafer and on every layer during the lithography steps. This metrology data will be used to obtain the process fingerprints. Also, the per exposure and per wafer correction potential of the scanners will be utilized for improved patterning control. Additionally, the fingerprint library will provide early detection of excursions for inline root cause analysis and process optimization guidance.

Angle comparison using an autocollimator

NASA Astrophysics Data System (ADS)

Geckeler, Ralf D.; Just, Andreas; Vasilev, Valentin; Prieto, Emilio; Dvorácek, František; Zelenika, Slobodan; Przybylska, Joanna; Duta, Alexandru; Victorov, Ilya; Pisani, Marco; Saraiva, Fernanda; Salgado, Jose-Antonio; Gao, Sitian; Anusorn, Tonmueanwai; Leng Tan, Siew; Cox, Peter; Watanabe, Tsukasa; Lewis, Andrew; Chaudhary, K. P.; Thalmann, Ruedi; Banreti, Edit; Nurul, Alfiyati; Fira, Roman; Yandayan, Tanfer; Chekirda, Konstantin; Bergmans, Rob; Lassila, Antti

2018-01-01

Autocollimators are versatile optical devices for the contactless measurement of the tilt angles of reflecting surfaces. An international key comparison (KC) on autocollimator calibration, EURAMET.L-K3.2009, was initiated by the European Association of National Metrology Institutes (EURAMET) to provide information on the capabilities in this field. The Physikalisch-Technische Bundesanstalt (PTB) acted as the pilot laboratory, with a total of 25 international participants from EURAMET and from the Asia Pacific Metrology Programme (APMP) providing measurements. This KC was the first one to utilise a high-resolution electronic autocollimator as a standard. In contrast to KCs in angle metrology which usually involve the full plane angle, it focused on relatively small angular ranges (+/-10 arcsec and +/-1000 arcsec) and step sizes (10 arcsec and 0.1 arcsec, respectively). This document represents the approved final report on the results of the KC. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

Evaluating the effects of modeling errors for isolated finite three-dimensional targets

NASA Astrophysics Data System (ADS)

Henn, Mark-Alexander; Barnes, Bryan M.; Zhou, Hui

2017-10-01

Optical three-dimensional (3-D) nanostructure metrology utilizes a model-based metrology approach to determine critical dimensions (CDs) that are well below the inspection wavelength. Our project at the National Institute of Standards and Technology is evaluating how to attain key CD and shape parameters from engineered in-die capable metrology targets. More specifically, the quantities of interest are determined by varying the input parameters for a physical model until the simulations agree with the actual measurements within acceptable error bounds. As in most applications, establishing a reasonable balance between model accuracy and time efficiency is a complicated task. A well-established simplification is to model the intrinsically finite 3-D nanostructures as either periodic or infinite in one direction, reducing the computationally expensive 3-D simulations to usually less complex two-dimensional (2-D) problems. Systematic errors caused by this simplified model can directly influence the fitting of the model to the measurement data and are expected to become more apparent with decreasing lengths of the structures. We identify these effects using selected simulation results and present experimental setups, e.g., illumination numerical apertures and focal ranges, that can increase the validity of the 2-D approach.

Registration performance on EUV masks using high-resolution registration metrology

NASA Astrophysics Data System (ADS)

Steinert, Steffen; Solowan, Hans-Michael; Park, Jinback; Han, Hakseung; Beyer, Dirk; Scherübl, Thomas

2016-10-01

Next-generation lithography based on EUV continues to move forward to high-volume manufacturing. Given the technical challenges and the throughput concerns a hybrid approach with 193 nm immersion lithography is expected, at least in the initial state. Due to the increasing complexity at smaller nodes a multitude of different masks, both DUV (193 nm) and EUV (13.5 nm) reticles, will then be required in the lithography process-flow. The individual registration of each mask and the resulting overlay error are of crucial importance in order to ensure proper functionality of the chips. While registration and overlay metrology on DUV masks has been the standard for decades, this has yet to be demonstrated on EUV masks. Past generations of mask registration tools were not necessarily limited in their tool stability, but in their resolution capabilities. The scope of this work is an image placement investigation of high-end EUV masks together with a registration and resolution performance qualification. For this we employ a new generation registration metrology system embedded in a production environment for full-spec EUV masks. This paper presents excellent registration performance not only on standard overlay markers but also on more sophisticated e-beam calibration patterns.

Test Plan for a Calibration Demonstration System for the Reflected Solar Instrument for the Climate Absolute Radiance and Refractivity Observatory

NASA Technical Reports Server (NTRS)

Thome, Kurtis; McCorkel, Joel; Hair, Jason; McAndrew, Brendan; Daw, Adrian; Jennings, Donald; Rabin, Douglas

2012-01-01

The Climate Absolute Radiance and Refractivity Observatory (CLARREO) mission addresses the need to observe high-accuracy, long-term climate change trends and to use decadal change observations as the most critical method to determine the accuracy of climate change. One of the major objectives of CLARREO is to advance the accuracy of SI traceable absolute calibration at infrared and reflected solar wavelengths. This advance is required to reach the on-orbit absolute accuracy required to allow climate change observations to survive data gaps while remaining sufficiently accurate to observe climate change to within the uncertainty of the limit of natural variability. While these capabilities exist at NIST in the laboratory, there is a need to demonstrate that it can move successfully from NIST to NASA and/or instrument vendor capabilities for future spaceborne instruments. The current work describes the test plan for the Solar, Lunar for Absolute Reflectance Imaging Spectroradiometer (SOLARIS) which is the calibration demonstration system (CDS) for the reflected solar portion of CLARREO. The goal of the CDS is to allow the testing and evaluation of calibration approaches , alternate design and/or implementation approaches and components for the CLARREO mission. SOLARIS also provides a test-bed for detector technologies, non-linearity determination and uncertainties, and application of future technology developments and suggested spacecraft instrument design modifications. The end result of efforts with the SOLARIS CDS will be an SI-traceable error budget for reflectance retrieval using solar irradiance as a reference and methods for laboratory-based, absolute calibration suitable for climate-quality data collections. The CLARREO mission addresses the need to observe high-accuracy, long-term climate change trends and advance the accuracy of SI traceable absolute calibration. The current work describes the test plan for the SOLARIS which is the calibration demonstration system for the reflected solar portion of CLARREO. SOLARIS provides a test-bed for detector technologies, non-linearity determination and uncertainties, and application of future technology developments and suggested spacecraft instrument design modifications. The end result will be an SI-traceable error budget for reflectance retrieval using solar irradiance as a reference and methods for laboratory-based, absolute calibration suitable for climate-quality data collections.

Traceability

PubMed Central

2010-01-01

The importance of effective and timely traceability in both the recall of substances of human origin (blood, cells, tissues and organs) implicated in infectious transmission, and in the prevention of inappropriate use of substances of human origin is now well recognised. However, traceability remains poorly understood and inadequately controlled in many cases. In particular there is: a lack of appreciation of the complexity of the traceability pathway; a fragmented approach to traceability; and, an assumption that traceability data is static. The traceability path for a single tissue donor may involve dozens or even hundreds of different organizations, each responsible for one segment of the path. Whilst responsibility within each organization may be clearly defined, responsibility for maintaining the interfaces between organizations is often less clear. Traceability is seldom regarded in a holistic manner, the assumption being made that if each segment of the pathway is correctly maintained then the full path will be intact. End to end traceability audits are not routinely performed, and the only true test of the trail occurs when recall is required—often with inadequate results. PMID:20628821

The Expanding Role of Traceability in Seafood: Tools and Key Initiatives.

PubMed

Lewis, Sara G; Boyle, Mariah

2017-08-01

In the last decade, a range of drivers within the seafood sector have incentivized the application of traceability to issues beyond food safety and inventory management. Some of the issues motivating the expanded use of traceability within the global seafood sector include: increased media attention on the legal and social risks within some seafood supply chains, governmental traceability requirements, private-sector sustainability commitments, and others. This article begins with an overview of these topics in the seafood industry, and why many nongovernment organizations (NGOs), companies, and government actors have turned to traceability as a tool to address them. We discuss how traceability connects to key requirements of environmental sustainability and social responsibility. Later, we review the range of traceability services, tools, software solutions, and the due diligence measures that are currently being leveraged within the seafood sector. The paper concludes with a discussion of several NGO- and industry-led traceability initiatives that are examples of seafood traceability improvements. © 2017 Institute of Food Technologists®.

A Theoretical Manpower Optimization Model for the Air Force Installation Contracting Agency (AFICA)

DTIC Science & Technology

2017-12-01

development and enterprise-wide market intelligence. The theoretical manpower model proposed by this project optimizes manpower in respect to contracting...procurement needs and/or more effectively leverage spend, market position, market knowledge (e.g., price benchmarks), and capabilities (e.g., IT...CONS level because the process savings are not clearly traceable to a contract action. For example, to augment the market intelligence of category

The New Kilogram Definition and its Implications for High-Precision Mass Tolerance Classes.

PubMed

Abbott, Patrick J; Kubarych, Zeina J

2013-01-01

The SI unit of mass, the kilogram, is the only remaining artifact definition in the seven fundamental units of the SI system. It will be redefined in terms of the Planck constant as soon as certain experimental conditions, based on recommendations of the Consultative Committee for Mass and Related Quantities (CCM) are met. To better reflect reality, the redefinition will likely be accompanied by an increase in the uncertainties that National Metrology Institutes (NMIs) pass on to customers via artifact dissemination, which could have an impact on the reference standards that are used by secondary calibration laboratories if certain weight tolerances are adopted for use. This paper will compare the legal metrology requirements for precision mass calibration laboratories after the kilogram is redefined with the current capabilities based on the international prototype kilogram (IPK) realization of the kilogram.

[Current progress in food geographical origin traceability by near infrared spectroscopy technology].

PubMed

Ma, Dong-Hong; Wang, Xi-Chang; Liu, Li-Ping; Liu, Yuan

2011-04-01

The geographical origin traceability of food, an important part of traceability system, is effective in protecting the quality and safety of foodstuffs. Near-infrared spectroscopy (NIR), which is a powerful technique for geographical origin traceability, has attracted extensive attention by scientists due to its speediness, non-pollution and simple operation. This paper presents the advantages and disadvantages of techniques that have been used for food geographical origin traceability. The basic principles of NIR and its applications in different food geographical origin traceability are presented too. Furthermore, problems in applications are analyzed and the future development trends are discussed.

Scatterometry—fast and robust measurements of nano-textured surfaces

NASA Astrophysics Data System (ADS)

Hannibal Madsen, Morten; Hansen, Poul-Erik

2016-06-01

Scatterometry is a fast, precise and low cost way to determine the mean pitch and dimensional parameters of periodic structures with lateral resolution of a few nanometer. It is robust enough for in-line process control and precise and accurate enough for metrology measurements. Furthermore, scatterometry is a non-destructive technique capable of measuring buried structures, for example a grating covered by a thick oxide layer. As scatterometry is a non-imaging technique, mathematical modeling is needed to retrieve structural parameters that describe a surface. In this review, the three main steps of scatterometry are discussed: the data acquisition, the simulation of diffraction efficiencies and the comparison of data and simulations. First, the intensity of the diffracted light is measured with a scatterometer as a function of incoming angle, diffraction angle and/or wavelength. We discuss the evolution of the scatterometers from the earliest angular scatterometers to the new imaging scatterometers. The basic principle of measuring diffraction efficiencies in scatterometry has remained the same since the beginning, but the instrumental improvements have made scatterometry a state-of-the-art solution for fast and accurate measurements of nano-textured surfaces. The improvements include extending the wavelength range from the visible to the extreme ultra-violet range, development of Fourier optics to measure all diffraction orders simultaneously, and an imaging scatterometer to measure area of interests smaller than the spot size. Secondly, computer simulations of the diffraction efficiencies are discussed with emphasis on the rigorous coupled-wave analysis (RCWA) method. RCWA has, since the mid-1990s, been the preferred method for grating simulations due to the speed of the algorithms. In the beginning the RCWA method suffered from a very slow convergence rate, and we discuss the historical improvements to overcome this challenge, e.g. by the introduction of Li’s factorization rules and the introduction of the normal vector method. The third step is the comparison, where the simulated diffraction efficiencies are compared to the experimental data using an inverse modeling approach. We discuss both a direct optimization scheme using a differential evolution algorithm and a library search strategy where diffraction efficiences of expected structures are collected in a database. For metrology measurements two methods are described for estimating the uncertainty of the fitting parameters. The first method is based on estimating the confidence limits using constant chi square boundaries, which can easily be computed when using the library search strategy. The other method is based on calculating the covariances of all the free parameters using a least square optimization. Scatterometry is already utilized in the semiconductor industry for in-line characterization. However, it also has a large potential for other industrial sectors, including sectors making use of injection molding or roll-2-roll fabrication. Using the library search strategy, the comparison can be performed in ms, making in-line characterization possible and we demonstrate that scatterometry can be used for quality control of injection molded nano-textured plastic samples. With the emerging methods of highly parallel manufacturing of nano-textured devices, scatterometry has great potential to deliver a characterization method for in-line quality control and metrology measurements, which is not possible with conventional characterization techniques. However, there are some open challenges for the scatterometry techniques. These include corrections for measuring on non-ideal samples with a large surface roughness or line-edge roughness and the path towards performing traceable scatterometry measurements.

Traceability of On-Machine Tool Measurement: A Review

PubMed Central

Gomez-Acedo, Eneko; Kortaberria, Gorka; Olarra, Aitor

2017-01-01

Nowadays, errors during the manufacturing process of high value components are not acceptable in driving industries such as energy and transportation. Sectors such as aerospace, automotive, shipbuilding, nuclear power, large science facilities or wind power need complex and accurate components that demand close measurements and fast feedback into their manufacturing processes. New measuring technologies are already available in machine tools, including integrated touch probes and fast interface capabilities. They provide the possibility to measure the workpiece in-machine during or after its manufacture, maintaining the original setup of the workpiece and avoiding the manufacturing process from being interrupted to transport the workpiece to a measuring position. However, the traceability of the measurement process on a machine tool is not ensured yet and measurement data is still not fully reliable enough for process control or product validation. The scientific objective is to determine the uncertainty on a machine tool measurement and, therefore, convert it into a machine integrated traceable measuring process. For that purpose, an error budget should consider error sources such as the machine tools, components under measurement and the interactions between both of them. This paper reviews all those uncertainty sources, being mainly focused on those related to the machine tool, either on the process of geometric error assessment of the machine or on the technology employed to probe the measurand. PMID:28696358

New blackbody standard for the evaluation and calibration of tympanic ear thermometers at the NPL, United Kingdom

NASA Astrophysics Data System (ADS)

McEvoy, Helen C.; Simpson, Robert; Machin, Graham

2004-04-01

The use of infrared tympanic thermometers for monitoring patient health is widespread. However, studies into the performance of these thermometers have questioned their accuracy and repeatability. To give users confidence in these devices, and to provide credibility in the measurements, it is necessary for them to be tested using an accredited, standard blackbody source, with a calibration traceable to the International Temperature Scale of 1990 (ITS-90). To address this need the National Physical Laboratory (NPL), UK, has recently set up a primary ear thermometer calibration (PET-C) source for the evaluation and calibration of tympanic (ear) thermometers over the range from 15 °C to 45 °C. The overall uncertainty of the PET-C source is estimated to be +/- 0.04 °C at k = 2. The PET-C source meets the requirements of the European Standard EN 12470-5: 2003 Clinical thermometers. It consists of a high emissivity blackbody cavity immersed in a bath of stirred liquid. The temperature of the blackbody is determined using an ITS-90 calibrated platinum resistance thermometer inserted close to the rear of the cavity. The temperature stability and uniformity of the PET-C source was evaluated and its performance validated. This paper provides a description of the PET-C along with the results of the validation measurements. To further confirm the performance of the PET-C source it was compared to the standard ear thermometer calibration sources of the National Metrology Institute of Japan (NMIJ), Japan and the Physikalisch-Technische Bundesanstalt (PTB), Germany. The results of this comparison will also be briefly discussed. The PET-C source extends the capability for testing ear thermometers offered by the NPL body temperature fixed-point source, described previously. An update on the progress with the commercialisation of the fixed-point source will be given.

Developing a spectroradiometer data uncertainty methodology

DOE Office of Scientific and Technical Information (OSTI.GOV)

Peterson, Josh; Vignola, Frank; Habte, Aron

The proper calibration and measurement uncertainty of spectral data obtained from spectroradiometers is essential in accurately quantifying the output of photovoltaic (PV) devices. PV cells and modules are initially characterized using solar simulators but field performance is evaluated using natural sunlight. Spectroradiometers are used to measure the spectrum of both these light sources in an effort to understand the spectral dependence of various PV output capabilities. These chains of characterization and measurement are traceable to National Metrology Institutes such as National Institute of Standards and Technology, and therefore there is a need for a comprehensive uncertainty methodology to determine themore » accuracy of spectroradiometer data. In this paper, the uncertainties associated with the responsivity of a spectroradiometer are examined using the Guide to the Expression of Uncertainty in Measurement (GUM) protocols. This is first done for a generic spectroradiometer, and then, to illustrate the methodology, the calibration of a LI-COR 1800 spectroradiometer is performed. The reader should be aware that the implementation of this methodology will be specific to the spectroradiometer being analyzed and the experimental setup that is used. Depending of the characteristics of the spectroradiometer being evaluated additional sources of uncertainty may need to be included, but the general GUM methodology is the same. Several sources of uncertainty are associated with the spectroradiometer responsivity. Major sources of uncertainty associated with the LI-COR spectroradiometer are noise in the signal at wavelengths less than 400 nm. At wavelengths more than 400 nm, the responsivity can vary drastically, and it is dependent on the wavelength of light, the temperature dependence, the angle of incidence, and the azimuthal orientation of the sensor to the light source. As a result, the expanded uncertainties in the responsivity of the LI-COR spectroradiometer in the wavelength range of 400-1050 nm can range from 4% to 14% at the 95% confidence level.« less

Proficiency Testing as a tool to monitor consistency of measurements in the IAEA/WHO Network of Secondary Standards Dosimetry Laboratories

DOE Office of Scientific and Technical Information (OSTI.GOV)

Meghzifene, Ahmed; Czap, Ladislav; Shortt, Ken

2008-08-14

The International Atomic Energy Agency (IAEA) and the World Health Organization (WHO) established a Network of Secondary Standards Dosimetry Laboratories (IAEA/WHO SSDL Network) in 1976. Through SSDLs designated by Member States, the Network provides a direct link of national dosimetry standards to the international measurement system of standards traceable to the Bureau International des Poids et Mesures (BIPM). Within this structure and through the proper calibration of field instruments, the SSDLs disseminate S.I. quantities and units.To ensure that the services provided by SSDL members to end-users follow internationally accepted standards, the IAEA has set up two different comparison programmes. Onemore » programme relies on the IAEA/WHO postal TLD service and the other uses comparisons of calibrated ionization chambers to help the SSDLs verify the integrity of their national standards and the procedures used for the transfer of the standards to the end-users. The IAEA comparisons include {sup 60}Co air kerma (N{sub K}) and absorbed dose to water (N{sub D,W}) coefficients. The results of the comparisons are confidential and are communicated only to the participants. This is to encourage participation of the laboratories and their full cooperation in the reconciliation of any discrepancy.This work describes the results of the IAEA programme comparing calibration coefficients for radiotherapy dosimetry, using ionization chambers. In this programme, ionization chambers that belong to the SSDLs are calibrated sequentially at the SSDL, at the IAEA, and again at the SSDL. As part of its own quality assurance programme, the IAEA has participated in several regional comparisons organized by Regional Metrology Organizations.The results of the IAEA comparison programme show that the majority of SSDLs are capable of providing calibrations that fall inside the acceptance level of 1.5% compared to the IAEA.« less

Developing a spectroradiometer data uncertainty methodology

DOE PAGES

Peterson, Josh; Vignola, Frank; Habte, Aron; ...

2017-04-11

The proper calibration and measurement uncertainty of spectral data obtained from spectroradiometers is essential in accurately quantifying the output of photovoltaic (PV) devices. PV cells and modules are initially characterized using solar simulators but field performance is evaluated using natural sunlight. Spectroradiometers are used to measure the spectrum of both these light sources in an effort to understand the spectral dependence of various PV output capabilities. These chains of characterization and measurement are traceable to National Metrology Institutes such as National Institute of Standards and Technology, and therefore there is a need for a comprehensive uncertainty methodology to determine themore » accuracy of spectroradiometer data. In this paper, the uncertainties associated with the responsivity of a spectroradiometer are examined using the Guide to the Expression of Uncertainty in Measurement (GUM) protocols. This is first done for a generic spectroradiometer, and then, to illustrate the methodology, the calibration of a LI-COR 1800 spectroradiometer is performed. The reader should be aware that the implementation of this methodology will be specific to the spectroradiometer being analyzed and the experimental setup that is used. Depending of the characteristics of the spectroradiometer being evaluated additional sources of uncertainty may need to be included, but the general GUM methodology is the same. Several sources of uncertainty are associated with the spectroradiometer responsivity. Major sources of uncertainty associated with the LI-COR spectroradiometer are noise in the signal at wavelengths less than 400 nm. At wavelengths more than 400 nm, the responsivity can vary drastically, and it is dependent on the wavelength of light, the temperature dependence, the angle of incidence, and the azimuthal orientation of the sensor to the light source. As a result, the expanded uncertainties in the responsivity of the LI-COR spectroradiometer in the wavelength range of 400-1050 nm can range from 4% to 14% at the 95% confidence level.« less

Towards absolute laser spectroscopic CO2 isotope ratio measurements

NASA Astrophysics Data System (ADS)

Anyangwe Nwaboh, Javis; Werhahn, Olav; Ebert, Volker

2017-04-01

Knowledge of isotope composition of carbon dioxide (CO2) in the atmosphere is necessary to identify sources and sinks of this key greenhouse gas. In the last years, laser spectroscopic techniques such as cavity ring-down spectroscopy (CRDS) and tunable diode laser absorption spectroscopy (TDLAS) have been shown to perform accurate isotope ratio measurements for CO2 and other gases like water vapour (H2O) [1,2]. Typically, isotope ratios are reported in literature referring to reference materials provided by e.g. the International Atomic Energy Agency (IAEA). However, there could be some benefit if field deployable absolute isotope ratio measurement methods were developed to address issues such as exhausted reference material like the Pee Dee Belemnite (PDB) standard. Absolute isotope ratio measurements would be particularly important for situations where reference materials do not even exist. Here, we present CRDS and TDLAS-based absolute isotope ratios (13C/12C ) in atmospheric CO2. We demonstrate the capabilities of the used methods by measuring CO2 isotope ratios in gas standards. We compare our results to values reported for the isotope certified gas standards. Guide to the expression of uncertainty in measurement (GUM) compliant uncertainty budgets on the CRDS and TDLAS absolute isotope ratio measurements are presented, and traceability is addressed. We outline the current impediments in realizing high accuracy absolute isotope ratio measurements using laser spectroscopic methods, propose solutions and the way forward. Acknowledgement Parts of this work have been carried out within the European Metrology Research Programme (EMRP) ENV52 project-HIGHGAS. The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union. References [1] B. Kühnreich, S. Wagner, J. C. Habig,·O. Möhler, H. Saathoff, V. Ebert, Appl. Phys. B 119:177-187 (2015). [2] E. Kerstel, L. Gianfrani, Appl. Phys. B 92, 439-449 (2008).

Requirement Development Process and Tools

NASA Technical Reports Server (NTRS)

Bayt, Robert

2017-01-01

Requirements capture the system-level capabilities in a set of complete, necessary, clear, attainable, traceable, and verifiable statements of need. Requirements should not be unduly restrictive, but should set limits that eliminate items outside the boundaries drawn, encourage competition (or alternatives), and capture source and reason of requirement. If it is not needed by the customer, it is not a requirement. They establish the verification methods that will lead to product acceptance. These must be reproducible assessment methods.

Measuring the In-Process Figure, Final Prescription, and System Alignment of Large Optics and Segmented Mirrors Using Lidar Metrology

NASA Technical Reports Server (NTRS)

Ohl, Raymond; Slotwinski, Anthony; Eegholm, Bente; Saif, Babak

2011-01-01

The fabrication of large optics is traditionally a slow process, and fabrication capability is often limited by measurement capability. W hile techniques exist to measure mirror figure with nanometer precis ion, measurements of large-mirror prescription are typically limited to submillimeter accuracy. Using a lidar instrument enables one to measure the optical surface rough figure and prescription in virtuall y all phases of fabrication without moving the mirror from its polis hing setup. This technology improves the uncertainty of mirror presc ription measurement to the micron-regime.

Characterization and imaging of nanostructured materials using tabletop extreme ultraviolet light sources

NASA Astrophysics Data System (ADS)

Karl, Robert; Knobloch, Joshua; Frazer, Travis; Tanksalvala, Michael; Porter, Christina; Bevis, Charles; Chao, Weilun; Abad Mayor, Begoña.; Adams, Daniel; Mancini, Giulia F.; Hernandez-Charpak, Jorge N.; Kapteyn, Henry; Murnane, Margaret

2018-03-01

Using a tabletop coherent extreme ultraviolet source, we extend current nanoscale metrology capabilities with applications spanning from new models of nanoscale transport and materials, to nanoscale device fabrication. We measure the ultrafast dynamics of acoustic waves in materials; by analyzing the material's response, we can extract elastic properties of films as thin as 11nm. We extend this capability to a spatially resolved imaging modality by using coherent diffractive imaging to image the acoustic waves in nanostructures as they propagate. This will allow for spatially resolved characterization of the elastic properties of non-isotropic materials.

Development of SI-traceable C-peptide certified reference material NMIJ CRM 6901-a using isotope-dilution mass spectrometry-based amino acid analyses.

PubMed

Kinumi, Tomoya; Goto, Mari; Eyama, Sakae; Kato, Megumi; Kasama, Takeshi; Takatsu, Akiko

2012-07-01

A certified reference material (CRM) is a higher-order calibration material used to enable a traceable analysis. This paper describes the development of a C-peptide CRM (NMIJ CRM 6901-a) by the National Metrology Institute of Japan using two independent methods for amino acid analysis based on isotope-dilution mass spectrometry. C-peptide is a 31-mer peptide that is utilized for the evaluation of β-cell function in the pancreas in clinical testing. This CRM is a lyophilized synthetic peptide having the human C-peptide sequence, and contains deamidated and pyroglutamylated forms of C-peptide. By adding water (1.00 ± 0.01) g into the vial containing the CRM, the C-peptide solution in 10 mM phosphate buffer saline (pH 6.6) is reconstituted. We assigned two certified values that represent the concentrations of total C-peptide (mixture of C-peptide, deamidated C-peptide, and pyroglutamylated C-peptide) and C-peptide. The certified concentration of total C-peptide was determined by two amino acid analyses using pre-column derivatization liquid chromatography-mass spectrometry and hydrophilic chromatography-mass spectrometry following acid hydrolysis. The certified concentration of C-peptide was determined by multiplying the concentration of total C-peptide by the ratio of the relative area of C-peptide to that of the total C-peptide measured by liquid chromatography. The certified value of C-peptide (80.7 ± 5.0) mg/L represents the concentration of the specific entity of C-peptide; on the other hand, the certified value of total C-peptide, (81.7 ± 5.1) mg/L can be used for analyses that does not differentiate deamidated and pyroglutamylated C-peptide from C-peptide itself, such as amino acid analyses and immunochemical assays.

[Traceability of labile blood products in Morocco: experience of the Ibn-Sina hospital of Rabat between 1999 and 2010].

PubMed

Ouadghiri, S; Atouf, O; Brick, C; Benseffaj, N; Essakalli, M

2012-02-01

The blood transfusion and haemovigilance service of the Ibn-Sina hospital in Rabat (Morocco) was created 1997. This unit manages the pretransfusional tests, distribution of blood products, traceability and haemovigilance. The objective of this study was to analyze, over a period of 12years, the traceability of blood products delivered in our hospital and the measures used to improve feedback information. This is a retrospective study conducted between 1999 and 2010. Traceability rate was calculated from the feedback of traceability forms supplied with blood products (number of blood products noted on traceability forms on the total number of delivered product). To improve traceability rate, several actions were undertaken: one-time training, awareness campaigns and call phones asking for feedback information. Between 1999 and 2010, the service has delivered 173,858 blood products. The average rate of traceability during this period was 13.4 %. Traceability rate varies widely over time (5.2 % in 1999, 15.5 % in 2010) and shows a maximum value of 27.2 % in 2005. Feedback information is lower in emergency departments than in medical and surgical services. Feedback information about traceability in Ibn-Sina hospital remains very poor despite the measures used. Other actions, such as continuous education courses, low enforcement and informatisation should be considered. Copyright © 2011 Elsevier Masson SAS. All rights reserved.

Traceability of biotech-derived animals: application of DNA technology.

PubMed

Loftus, R

2005-04-01

Traceability is increasingly becoming standard across the agri-food industry, largely driven by recent food crises and the consequent demands for transparency within the food chain. This is leading to the development of a range of traceability concepts and technologies adapted to different industry needs. Experience with genetically modified plants has shown that traceability can play a role in increasing public confidence in biotechnology, and might similarly help allay concerns relating to the development of animal biotechnology. Traceability also forms an essential component of any risk management strategy and is a key requirement for post-marketing surveillance. Given the diversity of traceability concepts and technologies available, consideration needs to be given to the scope and precision of traceability systems for animal biotechnology. Experience to date has shown that conventional tagging and labelling systems can incorporate levels of error and may not have sufficient precision for biotech-derived animals. Deoxyribonucleic acid (DNA) technology can overcome these difficulties by tracing animals and animal by-products through their DNA code rather than an associated label. This offers the possibility of tracing some by-products of animal biotechnology through the supply chain back to source animals, offering unprecedented levels of traceability. Developments in both DNA sampling and analysis technology are making large-scale applications of DNA traceability increasingly cost effective and feasible, and are likely to lead to a broader uptake of DNA traceability concepts.

Performance Prediction of a MongoDB-Based Traceability System in Smart Factory Supply Chains

PubMed Central

Kang, Yong-Shin; Park, Il-Ha; Youm, Sekyoung

2016-01-01

In the future, with the advent of the smart factory era, manufacturing and logistics processes will become more complex, and the complexity and criticality of traceability will further increase. This research aims at developing a performance assessment method to verify scalability when implementing traceability systems based on key technologies for smart factories, such as Internet of Things (IoT) and BigData. To this end, based on existing research, we analyzed traceability requirements and an event schema for storing traceability data in MongoDB, a document-based Not Only SQL (NoSQL) database. Next, we analyzed the algorithm of the most representative traceability query and defined a query-level performance model, which is composed of response times for the components of the traceability query algorithm. Next, this performance model was solidified as a linear regression model because the response times increase linearly by a benchmark test. Finally, for a case analysis, we applied the performance model to a virtual automobile parts logistics. As a result of the case study, we verified the scalability of a MongoDB-based traceability system and predicted the point when data node servers should be expanded in this case. The traceability system performance assessment method proposed in this research can be used as a decision-making tool for hardware capacity planning during the initial stage of construction of traceability systems and during their operational phase. PMID:27983654

Performance Prediction of a MongoDB-Based Traceability System in Smart Factory Supply Chains.

PubMed

Kang, Yong-Shin; Park, Il-Ha; Youm, Sekyoung

2016-12-14

In the future, with the advent of the smart factory era, manufacturing and logistics processes will become more complex, and the complexity and criticality of traceability will further increase. This research aims at developing a performance assessment method to verify scalability when implementing traceability systems based on key technologies for smart factories, such as Internet of Things (IoT) and BigData. To this end, based on existing research, we analyzed traceability requirements and an event schema for storing traceability data in MongoDB, a document-based Not Only SQL (NoSQL) database. Next, we analyzed the algorithm of the most representative traceability query and defined a query-level performance model, which is composed of response times for the components of the traceability query algorithm. Next, this performance model was solidified as a linear regression model because the response times increase linearly by a benchmark test. Finally, for a case analysis, we applied the performance model to a virtual automobile parts logistics. As a result of the case study, we verified the scalability of a MongoDB-based traceability system and predicted the point when data node servers should be expanded in this case. The traceability system performance assessment method proposed in this research can be used as a decision-making tool for hardware capacity planning during the initial stage of construction of traceability systems and during their operational phase.

Research on the method of establishing the total radiation meter calibration device

NASA Astrophysics Data System (ADS)

Gao, Jianqiang; Xia, Ming; Xia, Junwen; Zhang, Dong

2015-10-01

Pyranometer is an instrument used to measure the solar radiation, according to pyranometer differs as installation state, can be respectively measured total solar radiation, reflected radiation, or with the help of shading device for measuring scattering radiation. Pyranometer uses the principle of thermoelectric effect, inductive element adopts winding plating type multi junction thermopile, its surface is coated with black coating with high absorption rate. Hot junction in the induction surface, while the cold junction is located in the body, the cold and hot junction produce thermoelectric potential. In the linear range, the output signal is proportional to the solar irradiance. Traceability to national meteorological station, as the unit of the national legal metrology organizations, the responsibility is to transfer value of the sun and the earth radiation value about the national meteorological industry. Using the method of comparison, with indoor calibration of solar simulator, at the same location, standard pyranometer and measured pyranometer were alternately measured radiation irradiance, depending on the irradiation sensitivity standard pyranometer were calculated the radiation sensitivity of measured pyranometer. This paper is mainly about the design and calibration method of the pyranometer indoor device. The uncertainty of the calibration result is also evaluated.

Atomically Traceable Nanostructure Fabrication

PubMed Central

Ballard, Josh B.; Dick, Don D.; McDonnell, Stephen J.; Bischof, Maia; Fu, Joseph; Owen, James H. G.; Owen, William R.; Alexander, Justin D.; Jaeger, David L.; Namboodiri, Pradeep; Fuchs, Ehud; Chabal, Yves J.; Wallace, Robert M.; Reidy, Richard; Silver, Richard M.; Randall, John N.; Von Ehr, James

2015-01-01

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure. PMID:26274555

Atomically Traceable Nanostructure Fabrication.

PubMed

Ballard, Josh B; Dick, Don D; McDonnell, Stephen J; Bischof, Maia; Fu, Joseph; Owen, James H G; Owen, William R; Alexander, Justin D; Jaeger, David L; Namboodiri, Pradeep; Fuchs, Ehud; Chabal, Yves J; Wallace, Robert M; Reidy, Richard; Silver, Richard M; Randall, John N; Von Ehr, James

2015-07-17

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure.

Detecting Topological Defect Dark Matter Using Coherent Laser Ranging System

PubMed Central

Yang, Wanpeng; Leng, Jianxiao; Zhang, Shuangyou; Zhao, Jianye

2016-01-01

In the last few decades, optical frequency combs with high intensity, broad optical bandwidth, and directly traceable discrete wavelengths have triggered rapid developments in distance metrology. However, optical frequency combs to date have been limited to determine the absolute distance to an object (such as satellite missions). We propose a scheme for the detection of topological defect dark matter using a coherent laser ranging system composed of dual-combs and an optical clock via nongravitational signatures. The dark matter field, which comprises a defect, may interact with standard model particles, including quarks and photons, resulting in the alteration of their masses. Thus, a topological defect may function as a dielectric material with a distinctive frequency-depend index of refraction, which would cause the time delay of a periodic extraterrestrial or terrestrial light. When a topological defect passes through the Earth, the optical path of long-distance vacuum path is altered, this change in optical path can be detected through the coherent laser ranging system. Compared to continuous wavelength(cw) laser interferometry methods, dual-comb interferometry in our scheme excludes systematic misjudgement by measuring the absolute optical path length. PMID:27389642

Gigahertz single-electron pumping in silicon with an accuracy better than 9.2 parts in 10{sup 7}

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yamahata, Gento, E-mail: yamahata.gento@lab.ntt.co.jp; Karasawa, Takeshi; Fujiwara, Akira

2016-07-04

High-speed and high-accuracy pumping of a single electron is crucial for realizing an accurate current source, which is a promising candidate for a quantum current standard. Here, using a high-accuracy measurement system traceable to primary standards, we evaluate the accuracy of a Si tunable-barrier single-electron pump driven by a single sinusoidal signal. The pump operates at frequencies up to 6.5 GHz, producing a current of more than 1 nA. At 1 GHz, the current plateau with a level of about 160 pA is found to be accurate to better than 0.92 ppm (parts per million), which is a record value for 1-GHz operation. At 2 GHz,more » the current plateau offset from 1ef (∼320 pA) by 20 ppm is observed. The current quantization accuracy is improved by applying a magnetic field of 14 T, and we observe a current level of 1ef with an accuracy of a few ppm. The presented gigahertz single-electron pumping with a high accuracy is an important step towards a metrological current standard.« less

Development of new reference material neohesperidin for quality control of dietary supplements.

PubMed

Gong, Ningbo; Zhang, Baoxi; Yang, Dezhi; Gao, Zhaolin; Du, Guanhua; Lu, Yang

2015-07-01

Neohesperidin is an important natural flavanone glycoside distributed in several citrus species. This compound is widely used as a raw material for food additives in the food industry. The request for certified reference materials (CRMs) in dietary supplements was stipulated by the National Administrative Committee for CRMs and was underpinned by the need to improve the accuracy and comparability of measurement data and to establish metrological traceability of analytical results. This paper reports the sample preparation methodology, homogeneity and stability studies, value assignment and uncertainty estimation of a new certified reference material of neohesperidin (GBW09522). Differential scanning calorimetry, coulometric titration and mass balance methods proved to be sufficiently reliable and accurate for certification purposes. The certified value of neohesperidin CRM is 994 g kg(-1) with an expanded uncertainty of 4 g kg(-1) (k = 2). The reference material described above was homogeneous and stable for 12 months at a storage temperature of 25 °C. The new CRM of neohesperidin can be used to validate analytical methods and improve the accuracy of measurement data as well as quality control of neohesperidin-related dietary supplements, foods, traditional herbs and pharmaceutical formulations. © 2014 Society of Chemical Industry.

Traceability and Risk Analysis Strategies for Addressing Counterfeit Electronics in Supply Chains for Complex Systems.

PubMed

DiMase, Daniel; Collier, Zachary A; Carlson, Jinae; Gray, Robin B; Linkov, Igor

2016-10-01

Within the microelectronics industry, there is a growing concern regarding the introduction of counterfeit electronic parts into the supply chain. Even though this problem is widespread, there have been limited attempts to implement risk-based approaches for testing and supply chain management. Supply chain risk management tends to focus on the highly visible disruptions of the supply chain instead of the covert entrance of counterfeits; thus counterfeit risk is difficult to mitigate. This article provides an overview of the complexities of the electronics supply chain, and highlights some gaps in risk assessment practices. In particular, this article calls for enhanced traceability capabilities to track and trace parts at risk through various stages of the supply chain. Placing the focus on risk-informed decision making through the following strategies is needed, including prioritization of high-risk parts, moving beyond certificates of conformance, incentivizing best supply chain management practices, adoption of industry standards, and design and management for supply chain resilience. © 2016 Society for Risk Analysis.

Novel optoelectronic methodology for testing of MOEMS

NASA Astrophysics Data System (ADS)

Pryputniewicz, Ryszard J.; Furlong, Cosme

2003-01-01

Continued demands for delivery of high performance micro-optoelectromechanical systems (MOEMS) place unprecedented requirements on methods used in their development and operation. Metrology is a major and inseparable part of these methods. Optoelectronic methodology is an essential field of metrology. Due to its scalability, optoelectronic methodology is particularly suitable for testing of MOEMS where measurements must be made with ever increasing accuracy and precision. This was particularly evident during the last few years, characterized by miniaturization of devices, when requirements for measurements have rapidly increased as the emerging technologies introduced new products, especially, optical MEMS. In this paper, a novel optoelectronic methodology for testing of MOEMS is described and its applications are illustrated with representative examples. These examples demonstrate capability to measure submicron deformations of various components of the micromirror device, under operating conditions, and show viability of the optoelectronic methodology for testing of MOEMS.

Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data

PubMed Central

Ekberg, Peter; Su, Rong; Chang, Ernest W.; Yun, Seok Hyun; Mattsson, Lars

2014-01-01

Optical coherence tomography (OCT) is useful for materials defect analysis and inspection with the additional possibility of quantitative dimensional metrology. Here, we present an automated image-processing algorithm for OCT analysis of roll-to-roll multilayers in 3D manufacturing of advanced ceramics. It has the advantage of avoiding filtering and preset modeling, and will, thus, introduce a simplification. The algorithm is validated for its capability of measuring the thickness of ceramic layers, extracting the boundaries of embedded features with irregular shapes, and detecting the geometric deformations. The accuracy of the algorithm is very high, and the reliability is better than 1 µm when evaluating with the OCT images using the same gauge block step height reference. The method may be suitable for industrial applications to the rapid inspection of manufactured samples with high accuracy and robustness. PMID:24562018

Metrology test object for dimensional verification in additive manufacturing of metals for biomedical applications.

PubMed

Teeter, Matthew G; Kopacz, Alexander J; Nikolov, Hristo N; Holdsworth, David W

2015-01-01

Additive manufacturing continues to increase in popularity and is being used in applications such as biomaterial ingrowth that requires sub-millimeter dimensional accuracy. The purpose of this study was to design a metrology test object for determining the capabilities of additive manufacturing systems to produce common objects, with a focus on those relevant to medical applications. The test object was designed with a variety of features of varying dimensions, including holes, cylinders, rectangles, gaps, and lattices. The object was built using selective laser melting, and the produced dimensions were compared to the target dimensions. Location of the test objects on the build plate did not affect dimensions. Features with dimensions less than 0.300 mm did not build or were overbuilt to a minimum of 0.300 mm. The mean difference between target and measured dimensions was less than 0.100 mm in all cases. The test object is applicable to multiple systems and materials, tests the effect of location on the build, uses a minimum of material, and can be measured with a variety of efficient metrology tools (including measuring microscopes and micro-CT). Investigators can use this test object to determine the limits of systems and adjust build parameters to achieve maximum accuracy. © IMechE 2014.

The implementation of traceability systems.

PubMed

Ammendrup, S; Barcos, L O

2006-08-01

Traceability is a tool to help countries meet their objectives of controlling, preventing and eradicating animal diseases. This article sets out the required steps in a traceability system. Before designing a system of traceability, one must identify the different characteristics that need to be traced throughout the various steps in the food production chain. The interaction between different sectors in defining the objectives and the resulting needs of a traceability system is fundamental. A clear legal framework is also indispensable. European Union (EU) legislation requires identification and registration for cattle, pigs, sheep and goats. For intra-EU trade these animals must be accompanied by a health certificate providing information on their identity and health status. The required identification is harmonised on an EU-wide basis with the aim of ensuring traceability for veterinary purposes. Furthermore EU legislation requires that the traceability of food, feed and food-producing animals be established at all stages of production.

Qualification and Selection of Flight Diode Lasers for Space Applications

NASA Technical Reports Server (NTRS)

Liebe, Carl C.; Dillon, Robert P.; Gontijo, Ivair; Forouhar, Siamak; Shapiro, Andrew A.; Cooper, Mark S.; Meras, Patrick L.

2010-01-01

The reliability and lifetime of laser diodes is critical to space missions. The Nuclear Spectroscopic Telescope Array (NuSTAR) mission includes a metrology system that is based upon laser diodes. An operational test facility has been developed to qualify and select, by mission standards, laser diodes that will survive the intended space environment and mission lifetime. The facility is situated in an electrostatic discharge (ESD) certified clean-room and consist of an enclosed temperature-controlled stage that can accommodate up to 20 laser diodes. The facility is designed to characterize a single laser diode, in addition to conducting laser lifetime testing on up to 20 laser diodes simultaneously. A standard laser current driver is used to drive a single laser diode. Laser diode current, voltage, power, and wavelength are measured for each laser diode, and a method of selecting the most adequate laser diodes for space deployment is implemented. The method consists of creating histograms of laser threshold currents, powers at a designated current, and wavelengths at designated power. From these histograms, the laser diodes that illustrate a performance that is outside the normal are rejected and the remaining lasers are considered spaceborne candidates. To perform laser lifetime testing, the facility is equipped with 20 custom laser drivers that were designed and built by California Institute of Technology specifically to drive NuSTAR metrology lasers. The laser drivers can be operated in constant-current mode or alternating-current mode. Situated inside the enclosure, in front of the laser diodes, are 20 power-meter heads to record laser power throughout the duration of lifetime testing. Prior to connecting a laser diode to the current source for characterization and lifetime testing, a background program is initiated to collect current, voltage, and resistance. This backstage data collection enables the operational test facility to have full laser diode traceablity.

web-based interactive data processing: application to stable isotope metrology.

PubMed

Verkouteren, R M; Lee, J N

2001-08-01

To address a fundamental need in stable isotope metrology, the National Institute of Standards and Technology (NIST) has established a web-based interactive data-processing system accessible through a common gateway interface (CGI) program on the internet site http://www. nist.gov/widps-co2. This is the first application of a web-based tool that improves the measurement traceability afforded by a series of NIST standard materials. Specifically, this tool promotes the proper usage of isotope reference materials (RMs) and improves the quality of reported data from extensive measurement networks. Through the International Atomic Energy Agency (IAEA), we have defined standard procedures for stable isotope measurement and data-processing, and have determined and applied consistent reference values for selected NIST and IAEA isotope RMs. Measurement data of samples and RMs are entered into specified fields on the web-based form. These data are submitted through the CGI program on a NIST Web server, where appropriate calculations are performed and results returned to the client. Several international laboratories have independently verified the accuracy of the procedures and algorithm for measurements of naturally occurring carbon-13 and oxygen-18 abundances and slightly enriched compositions up to approximately 150% relative to natural abundances. To conserve the use of the NIST RMs, users may determine value assignments for a secondary standard to be used in routine analysis. Users may also wish to validate proprietary algorithms embedded in their laboratory instrumentation, or specify the values of fundamental variables that are usually fixed in reduction algorithms to see the effect on the calculations. The results returned from the web-based tool are limited in quality only by the measurements themselves, and further value may be realized through the normalization function. When combined with stringent measurement protocols, two- to threefold improvements have been realized in the reproducibility of carbon-13 and oxygen-18 determinations across laboratories.

Towards automated traceability maintenance

PubMed Central

Mäder, Patrick; Gotel, Orlena

2012-01-01

Traceability relations support stakeholders in understanding the dependencies between artifacts created during the development of a software system and thus enable many development-related tasks. To ensure that the anticipated benefits of these tasks can be realized, it is necessary to have an up-to-date set of traceability relations between the established artifacts. This goal requires the creation of traceability relations during the initial development process. Furthermore, the goal also requires the maintenance of traceability relations over time as the software system evolves in order to prevent their decay. In this paper, an approach is discussed that supports the (semi-) automated update of traceability relations between requirements, analysis and design models of software systems expressed in the UML. This is made possible by analyzing change events that have been captured while working within a third-party UML modeling tool. Within the captured flow of events, development activities comprised of several events are recognized. These are matched with predefined rules that direct the update of impacted traceability relations. The overall approach is supported by a prototype tool and empirical results on the effectiveness of tool-supported traceability maintenance are provided. PMID:23471308

High Sensitivity Optomechanical Reference Accelerometer over 10 kHz

DTIC Science & Technology

2014-06-05

bandwidth of 10 kHz and is traceable. We have incorporated a Fabry-P erot fiber-optic micro-cavity that is currently capable of measuring the test-mass...10 kHz- bandwidth requires displacement detection sensitivities at levels of 10 16 m= Hz p . Optical detection schemes, such as Fabry-P erot ...based micro- mirror Fabry-P erot cavity19,20 was built to operate in reflec- tion as the optical sensor. The mechanical oscillator ground platform and

Traceability in healthcare: crossing boundaries.

PubMed

Lovis, C

2008-01-01

This paper is a survey on the problem of traceability in healthcare. Traceability covers many different aspects and its understanding varies among different players. In supply chains and retails, traceability usually covers aspects pertaining to logistics. The challenge is to keep trace of objects manufactured, to track their locations in a production and distribution processes. In food industry, traceability has received a lot of attention because of public health problems related to infectious diseases. For instance, in Europe, the challenge of traceability has been to build the tracking of meat, from the living animal to the shell. In the health sector, traceability has mostly been involved in patient safety around human products such as blood derivates contaminants or implanted devices and prosthesis such as mammary implants. There are growing interests involving traceability in health related to drug safety, including the problem of counterfeited drugs, and to privacy. Traceability is also increasingly seen as a mean to improve efficiency of the logistics of care and a way to better understand costs and usage of resources. This survey is reviewing the literature and proposes a discussion based on the real use and needs of traceability in a large teaching hospital. Traceability in healthcare is at the crossroads of numerous needs. It is therefore of particular complexity and raises many new challenges. Identification management and entity tracking, from serialization of consumers' good production in the supply chains, to the identification of actors, patients, care providers, locations and processes is a huge effort, tackling economical, political, ethical and technical challenges. New requirements are needed, not usually met in the supply chain, such as serialization and persistence in time. New problems arise, such as privacy and legal frameworks. There are growing needs to increase traceability for drug products, related to drug safety, counterfeited drugs, and to privacy. Technical problems around reliability, robustness and efficiency of carriers are still to be resolved. There is a lot at stakes. Traceability is a major aspect of the future in healthcare and requires the attention of the community of medical informatics.

PREFACE: VII Brazilian Congress on Metrology (Metrologia 2013)

NASA Astrophysics Data System (ADS)

Costa-Félix, Rodrigo; Bernardes, Americo; Valente de Oliveira, José Carlos; Mauro Granjeiro, José; Epsztejn, Ruth; Ihlenfeld, Waldemar; Smarçaro da Cunha, Valnei

2015-01-01

SEVENTH BRAZILIAN CONGRESS ON METROLOGY (METROLOGIA 2013) Metrology and Quality for a Sustainable Development From November 24th to 27th 2013 was issued the Seventh Brazilian Congress on Metrology (Metrologia 2013), which is a biannual conference organized and sponsored by the Brazilian Society of Metrology (SBM) and the Brazilian National Institute of Metrology, Quality and Technology (Inmetro). This edition was held in the charming and historical city of Ouro Preto, MG, Brazil, and aimed to join people and institutions devoted to the dissemination of the metrology and conformity assessment. The Metrologia 2013 Conference consisted of Keynote Speeches (7) and regular papers (204). Among the regular papers, the 47 most outstanding ones, comprising a high quality content on Metrology and Conformity Assessment, were selected to be published in this issue of the Journal of Physics: Conference Series. The topics of the conference covered all important areas of Metrology, which were agglutinated in the following sessions in the present issue: . Physical Metrology (Acoustics, Vibration and Ultrasound; Electricity and Magnetism; Mechanics; Optics); . Metrology on Ionizing Radiations; . Time and Frequency; . Chemistry Metrology; . Materials Metrology; . Biotechnology; . Uncertainty, Statistics and Mathematics; . Legal Metrology; . Conformity Assessment. It is our great pleasure to present this volume of IOP Journal of Physics: Conference Series (JPCS) to the scientific community to promote further research in Metrology and related areas. We believe that this volume will be both an excellent source of scientific material in the fast evolving fields that were covered by Metrologia 2013. President of the congress Americo Bernardes Federal University of Ouro Preto atb@iceb.ufop.br Editor-in-chief Rodrigo Costa-Félix Brazilian National Institute of Metrology, Quality and Technology rpfelix@inmetro.gov.br Editors José Carlos Valente de Oliveira (Editor on Mechanical Metrology) Brazilian National Institute of Metrology, Quality and Technology jcoliveira@inmetro.gov.br José Mauro Granjeiro (Editor on Biotechnology) Brazilian National Institute of Metrology, Quality and Technology jmgranjeiro@inmetro.gov.br Ruth Epsztejn (Editor on Conformity Assessment) Brazilian National Institute of Metrology, Quality and Technology repsztejn@inmetro.gov.br Waldemar Ihlenfeld (Editor on Electrical Metrology) Brazilian National Institute of Metrology, Quality and Technology wgihlenfeld-pronametro@inmetro.gov.br Valnei Smarçaro da Cunha (Editor on Chemistry Metrology) Brazilian National Institute of Metrology, Quality and Technology vscunha@inmetro.gov.br Technical and Scientific Committee for Metrologia 2013 Ado Jório (UFMG) Carlos Achete (UFRJ, Inmetro) Flávio Vasconcelos (UFMG) Giorgio Moscati (USP) Hans Peter Grieneisen (Inmetro) Humberto Brandi (Inmetro) José Carlos Valente de Oliveira (Inmetro) José Guilherme Pereira Peixoto (IRD) José Mauro Granjeiro (Inmetro) Luiz Claudio Moreira Paschoal (Petrobras) Luis Fernado Rust (Inmetro) Luiz Silva Mello (PUC RJ) Marcos Nogueira Eberlin (Unicamp) Oleksii Kuznetsov (Inmetro) Regis Landim (Inmetro) Ricardo Carvalho (ON) Rodrigo Costa-Felix (Inmetro) Romeu José Daroda (Inmetro) Ruth Epsztejn (Inmetro) Valnei Smarçaro da Cunha (Inmetro) Valter Aibe (Inmetro) Waldemar Guilherme Kürten Ihlenfeld (PTB) Wanderley de Souza (UFRJ, Inmetro)

In-cell overlay metrology by using optical metrology tool

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, DongYoung; Oh, Eungryong; Choi, Ahlin; Park, Hyowon; Liang, Waley; Choi, DongSub; Kim, Nakyoon; Lee, Jeongpyo; Pandev, Stilian; Jeon, Sanghuck; Robinson, John C.

2018-03-01

Overlay is one of the most critical process control steps of semiconductor manufacturing technology. A typical advanced scheme includes an overlay feedback loop based on after litho optical imaging overlay metrology on scribeline targets. The after litho control loop typically involves high frequency sampling: every lot or nearly every lot. An after etch overlay metrology step is often included, at a lower sampling frequency, in order to characterize and compensate for bias. The after etch metrology step often involves CD-SEM metrology, in this case in-cell and ondevice. This work explores an alternative approach using spectroscopic ellipsometry (SE) metrology and a machine learning analysis technique. Advanced 1x nm DRAM wafers were prepared, including both nominal (POR) wafers with mean overlay offsets, as well as DOE wafers with intentional across wafer overlay modulation. After litho metrology was measured using optical imaging metrology, as well as after etch metrology using both SE and CD-SEM for comparison. We investigate 2 types of machine learning techniques with SE data: model-less and model-based, showing excellent performance for after etch in-cell on-device overlay metrology.

Characterization of shape and deformation of MEMS by quantitative optoelectronic metrology techniques

NASA Astrophysics Data System (ADS)

Furlong, Cosme; Pryputniewicz, Ryszard J.

2002-06-01

Recent technological trends based on miniaturization of mechanical, electro-mechanical, and photonic devices to the microscopic scale, have led to the development of microelectromechanical systems (MEMS). Effective development of MEMS components requires the synergism of advanced design, analysis, and fabrication methodologies, and also of quantitative metrology techniques for characterizing their performance, reliability, and integrity during the electronic packaging cycle. In this paper, we describe opto-electronic techniques for measuring, with sub-micrometer accuracy, shape and changes in states of deformation of MEMS strictures. With the described opto-electronic techniques, it is possible to characterize MEMS components using the display and data modes. In the display mode, interferometric information related to shape and deformation is displayed at video frame rates, providing the capability for adjusting and setting experimental conditions. In the data mode, interferometric information related to shape and deformation is recorded as high-spatial and high-digital resolution images, which are further processed to provide quantitative 3D information. Furthermore, the quantitative 3D data are exported to computer-aided design (CAD) environments and utilized for analysis and optimization of MEMS devices. Capabilities of opto- electronic techniques are illustrated with representative applications demonstrating their applicability to provide indispensable quantitative information for the effective development and optimization of MEMS devices.

Dual frequency comb metrology with one fiber laser

NASA Astrophysics Data System (ADS)

Zhao, Xin; Takeshi, Yasui; Zheng, Zheng

2016-11-01

Optical metrology techniques based on dual optical frequency combs have emerged as a hotly studied area targeting a wide range of applications from optical spectroscopy to microwave and terahertz frequency measurement. Generating two sets of high-quality comb lines with slightly different comb-tooth spacings with high mutual coherence and stability is the key to most of the dual-comb schemes. The complexity and costs of such laser sources and the associated control systems to lock the two frequency combs hinder the wider adoption of such techniques. Here we demonstrate a very simple and rather different approach to tackle such a challenge. By employing novel laser cavity designs in a mode-locked fiber laser, a simple fiber laser setup could emit dual-comb pulse output with high stability and good coherence between the pulse trains. Based on such lasers, comb-tooth-resolved dual-comb optical spectroscopy is demonstrated. Picometer spectral resolving capability could be realized with a fiber-optic setup and a low-cost data acquisition system and standard algorithms. Besides, the frequency of microwave signals over a large range can be determined based on a simple setup. Our results show the capability of such single-fiber-laser-based dual-comb scheme to reduce the complexity and cost of dual-comb systems with excellent quality for different dual-comb applications.

Metrology Arrangement for Measuring the Positions of Mirrors of a Submillimeter Telescope

NASA Technical Reports Server (NTRS)

Abramovici, Alex; Bartman, Randall K.

2011-01-01

The position of the secondary mirror of a submillimeter telescope with respect to the primary mirror needs to be known .0.03 mm in three dimensions. At the time of this reporting, no convenient, reasonably priced arrangement that offers this capability exists. The solution proposed here relies on measurement devices developed and deployed for the GeoSAR mission, and later adapted for the ISAT (Innovative Space Based Radar Antenna Technology) demonstration. The measurement arrangement consists of four metrology heads, located on an optical bench, attached to the secondary mirror. Each metrology head has a dedicated target located at the edge of the primary mirror. One laser beam, launched from the head and returned by the target, is used to measure distance. Another beam, launched from a beacon on the target, is monitored by the metrology head and generates a measurement of the target position in the plane perpendicular to the laser beam. A 100-MHz modulation is carried by a collimated laser beam. The relevant wavelength is the RF one, 3 m, divided by two, because the light carries it to the target and back. The phase change due to travel to the target and back is measured by timing the zero-crossing of the RF modulation, using a 100-MHz clock. In order to obtain good resolution, the 100-MHz modulation signal is down-converted to 1 kHz. Then, the phase change corresponding to the round-trip to the target is carried by a 1-kHz signal. Since the 100-MHz clock beats 100,000 times during one period of the 1-kHz signal, the least-significant-bit (LSB) resolution is LSB = 0.015 mm.

Solving next generation (1x node) metrology challenges using advanced CDSEM capabilities: tilt, high energy and backscatter imaging

NASA Astrophysics Data System (ADS)

Zhang, Xiaoxiao; Snow, Patrick W.; Vaid, Alok; Solecky, Eric; Zhou, Hua; Ge, Zhenhua; Yasharzade, Shay; Shoval, Ori; Adan, Ofer; Schwarzband, Ishai; Bar-Zvi, Maayan

2015-03-01

Traditional metrology solutions are facing a range of challenges at the 1X node such as three dimensional (3D) measurement capabilities, shrinking overlay and critical dimension (CD) error budgets driven by multi-patterning and via in trench CD measurements. Hybrid metrology offers promising new capabilities to address some of these challenges but it will take some time before fully realized. This paper explores new capabilities currently offered on the in-line Critical Dimension Scanning Electron Microscope (CD-SEM) to address these challenges and enable the CD-SEM to move beyond measuring bottom CD using top down imaging. Device performance is strongly correlated with Fin geometry causing an urgent need for 3D measurements. New beam tilting capabilities enhance the ability to make 3D measurements in the front-end-of-line (FEOL) of the metal gate FinFET process in manufacturing. We explore these new capabilities for measuring Fin height and build upon the work communicated last year at SPIE1. Furthermore, we extend the application of the tilt beam to the back-end-of-line (BEOL) trench depth measurement and demonstrate its capability in production targeting replacement of the existing Atomic Force Microscope (AFM) measurements by including the height measurement in the existing CDSEM recipe to reduce fab cycle time. In the BEOL, another increasingly challenging measurement for the traditional CD-SEM is the bottom CD of the self-aligned via (SAV) in a trench first via last (TFVL) process. Due to the extremely high aspect ratio of the structure secondary electron (SE) collection from the via bottom is significantly reduced requiring the use of backscatter electrons (BSE) to increase the relevant image quality. Even with this solution, the resulting images are difficult to measure with advanced technology nodes. We explore new methods to increase measurement robustness and combine this with novel segmentation-based measurement algorithm generated specifically for BSE images. The results will be contrasted with data from previously used methods to quantify the improvement. We also compare the results to electrical test data to evaluate and quantify the measurement performance improvements. Lastly, according to International Technology Roadmap for Semiconductors (ITRS) from 2013, the overlay 3 sigma requirement will be 3.3 nm in 2015 and 2.9 nm in 2016. Advanced lithography requires overlay measurement in die on features resembling the device geometry. However, current optical overlay measurement is performed in the scribe line on large targets due to optical diffraction limit. In some cases, this limits the usefulness of the measurement since it does not represent the true behavior of the device. We explore using high voltage imaging to help address this urgent need. Novel CD-SEM based overlay targets that optimize the restrictions of process geometry and SEM technique were designed and spread out across the die. Measurements are done on these new targets both after photolithography and etch. Correlation is drawn between the two measurements. These results will also be compared to conventional optical overlay measurement approaches and we will discuss the possibility of using this capability in high volume manufacturing.

The AEDC aerospace chamber 7V: An advanced test capability for infrared surveillance and seeker sensors

NASA Technical Reports Server (NTRS)

Simpson, W. R.

1994-01-01

An advanced sensor test capability is now operational at the Air Force Arnold Engineering Development Center (AEDC) for calibration and performance characterization of infrared sensors. This facility, known as the 7V, is part of a broad range of test capabilities under development at AEDC to provide complete ground test support to the sensor community for large-aperture surveillance sensors and kinetic kill interceptors. The 7V is a state-of-the-art cryo/vacuum facility providing calibration and mission simulation against space backgrounds. Key features of the facility include high-fidelity scene simulation with precision track accuracy and in-situ target monitoring, diffraction limited optical system, NIST traceable broadband and spectral radiometric calibration, outstanding jitter control, environmental systems for 20 K, high-vacuum, low-background simulation, and an advanced data acquisition system.

The perceived value of dairy product traceability in modern society: An exploratory study.

PubMed

Charlebois, Sylvain; Haratifar, Sanaz

2015-05-01

The current study assessed the perceived value of food traceability in modern society by young consumers. After experiencing numerous recalls and food safety-related incidences, consumers are increasingly aware of the tools available to mitigate risks. Food traceability has been associated with food safety procedures for many years, but recent high-profile cases of food fraud around the world have given traceability a different strategic purpose. Focusing solely on dairy products, our survey results offer a glimpse of consumer perceptions of traceability as a means to preserve food integrity and authenticity. This study explored the various influences that market-oriented traceability has had on dairy consumers. For example, results show that if the dairy sector could guarantee that their product is in fact organic, 53.8% of respondents who often purchase organic milk would consider always purchasing traceable organic milk. This research produced a quantitative set of information related to the perceived value of food traceability, which could be useful for the creation and development of improved guidelines and better education for consumers. We discuss limitations and suggest areas for new research. Copyright © 2015 American Dairy Science Association. Published by Elsevier Inc. All rights reserved.

Augmented halal food traceability system: analysis and design using UML

NASA Astrophysics Data System (ADS)

Usman, Y. V.; Fauzi, A. M.; Irawadi, T. T.; Djatna, T.

2018-04-01

Augmented halal food traceability is expanding the range of halal traceability in food supply chain where currently only available for tracing from the source of raw material to the industrial warehouse or inbound logistic. The halal traceability system must be developed in the integrated form that includes inbound and outbound logistics. The objective of this study was to develop a reliable initial model of integrated traceability system of halal food supply chain. The method was based on unified modeling language (UML) such as use case, sequence, and business process diagram. A goal programming model was formulated considering two objective functions which include (1) minimization of risk of halal traceability failures happened potentially during outbound logistics activities and (2) maximization of quality of halal product information. The result indicates the supply of material is the most important point to be considered in minimizing the risk of failure of halal food traceability system whereas no risk observed in manufacturing and distribution.

Method and system for processing optical elements using magnetorheological finishing

DOEpatents

Menapace, Joseph Arthur; Schaffers, Kathleen Irene; Bayramian, Andrew James; Molander, William A

2012-09-18

A method of finishing an optical element includes mounting the optical element in an optical mount having a plurality of fiducials overlapping with the optical element and obtaining a first metrology map for the optical element and the plurality of fiducials. The method also includes obtaining a second metrology map for the optical element without the plurality of fiducials, forming a difference map between the first metrology map and the second metrology map, and aligning the first metrology map and the second metrology map. The method further includes placing mathematical fiducials onto the second metrology map using the difference map to form a third metrology map and associating the third metrology map to the optical element. Moreover, the method includes mounting the optical element in the fixture in an MRF tool, positioning the optical element in the fixture; removing the plurality of fiducials, and finishing the optical element.

Communicating food safety, authenticity and consumer choice. Field experiences.

PubMed

Syntesa, Heiner Lehr

2013-04-01

The paper reviews patented and non-patented technologies, methods and solutions in the area of food traceability. It pays special attention to the communication of food safety, authenticity and consumer choice. Twenty eight recent patents are reviewed in the areas of (secure) identification, product freshness indicators, meat traceability, (secure) transport of information along the supply chain, country/region/place of origin, automated authentication, supply chain management systems, consumer interaction systems. In addition, solutions and pilot projects are described in the areas of Halal traceability, traceability of bird's nests, cold chain management, general food traceability and other areas.

21 CFR 820.65 - Traceability.

Code of Federal Regulations, 2014 CFR

2014-04-01

... QUALITY SYSTEM REGULATION Identification and Traceability § 820.65 Traceability. Each manufacturer of a device that is intended for surgical implant into the body or to support or sustain life and whose...

21 CFR 820.65 - Traceability.

Code of Federal Regulations, 2013 CFR

2013-04-01

... QUALITY SYSTEM REGULATION Identification and Traceability § 820.65 Traceability. Each manufacturer of a device that is intended for surgical implant into the body or to support or sustain life and whose...

21 CFR 820.65 - Traceability.

Code of Federal Regulations, 2012 CFR

2012-04-01

... QUALITY SYSTEM REGULATION Identification and Traceability § 820.65 Traceability. Each manufacturer of a device that is intended for surgical implant into the body or to support or sustain life and whose...

21 CFR 820.65 - Traceability.

Code of Federal Regulations, 2010 CFR

2010-04-01

... QUALITY SYSTEM REGULATION Identification and Traceability § 820.65 Traceability. Each manufacturer of a device that is intended for surgical implant into the body or to support or sustain life and whose...

21 CFR 820.65 - Traceability.

Code of Federal Regulations, 2011 CFR

2011-04-01

... QUALITY SYSTEM REGULATION Identification and Traceability § 820.65 Traceability. Each manufacturer of a device that is intended for surgical implant into the body or to support or sustain life and whose...

Investigation of phase distribution using Phame® in-die phase measurements

NASA Astrophysics Data System (ADS)

Buttgereit, Ute; Perlitz, Sascha

2009-03-01

As lithography mask processes move toward 45nm and 32nm node, mask complexity increases steadily, mask specifications tighten and process control becomes extremely important. Driven by this fact the requirements for metrology tools increase as well. Efforts in metrology have been focused on accurately measuring CD linearity and uniformity across the mask, and accurately measuring phase variation on Alternating/Attenuated PSM and transmission for Attenuated PSM. CD control on photo masks is usually done through the following processes: exposure dose/focus change, resist develop and dry etch. The key requirement is to maintain correct CD linearity and uniformity across the mask. For PSM specifically, the effect of CD uniformity for both Alternating PSM and Attenuated PSM and etch depth for Alternating PSM becomes also important. So far phase measurement has been limited to either measuring large-feature phase using interferometer-based metrology tools or measuring etch depth using AFM and converting etch depth into phase under the assumption that trench profile and optical properties of the layers remain constant. However recent investigations show that the trench profile and optical property of layers impact the phase. This effect is getting larger for smaller CD's. The currently used phase measurement methods run into limitations because they are not able to capture 3D mask effects, diffraction limitations or polarization effects. The new phase metrology system - Phame(R) developed by Carl Zeiss SMS overcomes those limitations and enables laterally resolved phase measurement in any kind of production feature on the mask. The resolution of the system goes down to 120nm half pitch at mask level. We will report on tool performance data with respect to static and dynamic phase repeatability focusing on Alternating PSM. Furthermore the phase metrology system was used to investigate mask process signatures on Alternating PSM in order to further improve the overall PSM process performance. Especially global loading effects caused by the pattern density and micro loading effects caused by the feature size itself have been evaluated using the capability of measuring phase in the small production features. The results of this study will be reported in this paper.

Interoperability Using Lightweight Metadata Standards: Service & Data Casting, OpenSearch, OPM Provenance, and Shared SciFlo Workflows

NASA Astrophysics Data System (ADS)

Wilson, B. D.; Manipon, G.; Hua, H.; Fetzer, E.

2011-12-01

Under several NASA grants, we are generating multi-sensor merged atmospheric datasets to enable the detection of instrument biases and studies of climate trends over decades of data. For example, under a NASA MEASURES grant we are producing a water vapor climatology from the A-Train instruments, stratified by the Cloudsat cloud classification for each geophysical scene. The generation and proper use of such multi-sensor climate data records (CDR's) requires a high level of openness, transparency, and traceability. To make the datasets self-documenting and provide access to full metadata and traceability, we have implemented a set of capabilities and services using known, interoperable protocols. These protocols include OpenSearch, OPeNDAP, Open Provenance Model, service & data casting technologies using Atom feeds, and REST-callable analysis workflows implemented as SciFlo (XML) documents. We advocate that our approach can serve as a blueprint for how to openly "document and serve" complex, multi-sensor CDR's with full traceability. The capabilities and services provided include: - Discovery of the collections by keyword search, exposed using OpenSearch protocol; - Space/time query across the CDR's granules and all of the input datasets via OpenSearch; - User-level configuration of the production workflows so that scientists can select additional physical variables from the A-Train to add to the next iteration of the merged datasets; - Efficient data merging using on-the-fly OPeNDAP variable slicing & spatial subsetting of data out of input netCDF and HDF files (without moving the entire files); - Self-documenting CDR's published in a highly usable netCDF4 format with groups used to organize the variables, CF-style attributes for each variable, numeric array compression, & links to OPM provenance; - Recording of processing provenance and data lineage into a query-able provenance trail in Open Provenance Model (OPM) format, auto-captured by the workflow engine; - Open Publishing of all of the workflows used to generate products as machine-callable REST web services, using the capabilities of the SciFlo workflow engine; - Advertising of the metadata (e.g. physical variables provided, space/time bounding box, etc.) for our prepared datasets as "datacasts" using the Atom feed format; - Publishing of all datasets via our "DataDrop" service, which exploits the WebDAV protocol to enable scientists to access remote data directories as local files on their laptops; - Rich "web browse" of the CDR's with full metadata and the provenance trail one click away; - Advertising of all services as Google-discoverable "service casts" using the Atom format. The presentation will describe our use of the interoperable protocols and demonstrate the capabilities and service GUI's.

Toward reliable and repeatable automated STEM-EDS metrology with high throughput

NASA Astrophysics Data System (ADS)

Zhong, Zhenxin; Donald, Jason; Dutrow, Gavin; Roller, Justin; Ugurlu, Ozan; Verheijen, Martin; Bidiuk, Oleksii

2018-03-01

New materials and designs in complex 3D architectures in logic and memory devices have raised complexity in S/TEM metrology. In this paper, we report about a newly developed, automated, scanning transmission electron microscopy (STEM) based, energy dispersive X-ray spectroscopy (STEM-EDS) metrology method that addresses these challenges. Different methodologies toward repeatable and efficient, automated STEM-EDS metrology with high throughput are presented: we introduce the best known auto-EDS acquisition and quantification methods for robust and reliable metrology and present how electron exposure dose impacts the EDS metrology reproducibility, either due to poor signalto-noise ratio (SNR) at low dose or due to sample modifications at high dose conditions. Finally, we discuss the limitations of the STEM-EDS metrology technique and propose strategies to optimize the process both in terms of throughput and metrology reliability.

Report of the CCQM-K97: measurement of arsenobetaine standard solution and arsenobetaine content in fish tissue (tunafish)

NASA Astrophysics Data System (ADS)

Ma, L. D.; Wang, J.; WEI, C.; Kuroiwa, T.; Narukawa, T.; Ito, N.; HIOKI, A.; CHIBA, K.; Yim, Y. H.; Lee, K. S.; Lim, Y. R.; Turk, G. C.; Davis, C. W.; Mester, Z.; Yang, L.; McCooeye, M.; Maxwell, P.; Cankur, O.; Tokman, N.; Coskun, F. G.

2017-01-01

The CCQM-K97 key comparison was organized by the inorganic analysis working group (IAWG) of CCQM as a follow-up to completed pilot study CCQM-P96 and P96.1 to test the abilities of the national metrology institutes to accurately quantitate the mass fraction of arsenobetaine (AsB) in standard solution and in fish tissue. A pilot study CCQM-P133 was parallelized with this key comparison. National Institute of Metrology (NIM), China and National Metrology Institute of Japan (NMIJ) acted as the coordinating laboratories. Six NMIs participated in CCQM-K97 and two institutes participated in CCQM-P133, and all of them submitted the results. Some NMIs submitted more than one results by different methods. The results were in excellent agreement with each other, and obviously better than those of previous P96 and P96.1. Therefore the calibrant which each NMI used was comparable. It shows that the capabilities of some of the participants have been improved after the previous pilot studies. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCQM, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

NASA Astrophysics Data System (ADS)

van Es, Maarten H.; Mohtashami, Abbas; Piras, Daniele; Sadeghian, Hamed

2018-03-01

Nondestructive subsurface nanoimaging through optically opaque media is considered to be extremely challenging and is essential for several semiconductor metrology applications including overlay and alignment and buried void and defect characterization. The current key challenge in overlay and alignment is the measurement of targets that are covered by optically opaque layers. Moreover, with the device dimensions moving to the smaller nodes and the issue of the so-called loading effect causing offsets between between targets and product features, it is increasingly desirable to perform alignment and overlay on product features or so-called on-cell overlay, which requires higher lateral resolution than optical methods can provide. Our recently developed technique known as SubSurface Ultrasonic Resonance Force Microscopy (SSURFM) has shown the capability for high-resolution imaging of structures below a surface based on (visco-)elasticity of the constituent materials and as such is a promising technique to perform overlay and alignment with high resolution in upcoming production nodes. In this paper, we describe the developed SSURFM technique and the experimental results on imaging buried features through various layers and the ability to detect objects with resolution below 10 nm. In summary, the experimental results show that the SSURFM is a potential solution for on-cell overlay and alignment as well as detecting buried defects or voids and generally metrology through optically opaque layers.

A 3D metrology system for the GMT

NASA Astrophysics Data System (ADS)

Rakich, A.; Dettmann, Lee; Leveque, S.; Guisard, S.

2016-08-01

The Giant Magellan Telescope (GMT)1 is a 25 m telescope composed of seven 8.4 m "unit telescopes", on a common mount. Each primary and conjugated secondary mirror segment will feed a common instrument interface, their focal planes co-aligned and co-phased. During telescope operation, the alignment of the optical components will deflect due to variations in thermal environment and gravity induced structural flexure of the mount. The ultimate co-alignment and co-phasing of the telescope is achieved by a combination of the Acquisition Guiding and Wavefront Sensing system and two segment edge-sensing systems2. An analysis of the capture range of the wavefront sensing system indicates that it is unlikely that that system will operate efficiently or reliably with initial mirror positions provided by open-loop corrections alone3. The project is developing a Telescope Metrology System (TMS) which incorporates a large number of absolute distance measuring interferometers. The system will align optical components of the telescope to the instrument interface to (well) within the capture range of the active optics wavefront sensing systems. The advantages offered by this technological approach to a TMS, over a network of laser trackers, are discussed. Initial investigations of the Etalon Absolute Multiline Technology™ by Etalon Ag4 show that a metrology network based on this product is capable of meeting requirements. A conceptual design of the system is presented and expected performance is discussed.

Modeling traceability information and functionality requirement in export-oriented tilapia chain.

PubMed

Zhang, Xiaoshuan; Feng, Jianying; Xu, Mark; Hu, Jinyou

2011-05-01

Tilapia has been named as the 'food fish of the 21st century' and has become the most important farmed fish. China is the world leader in tilapia production and export. Identifying information and functional requirements is critical in developing an efficient traceability system because traceability has become a fundamental prerequisite for exporting aquaculture products. This paper examines the export-oriented tilapia chains and information flow in the chains, and identifies the key actors, information requirements and information-capturing points. Unified Modeling Language (UML) technology is adopted to describe the information and functionality requirement for chain traceability. The barriers of traceability system adoption are also identified. The results show that the traceability data consist of four categories that must be recorded by each link in the chain. The functionality requirement is classified into four categories from the fundamental information record to decisive quality control; the top three barriers to the traceability system adoption are: high costs of implementing the system, lack of experienced and professional staff; and low level of government involvement and support. Copyright © 2011 Society of Chemical Industry.

An Initial Model of Requirements Traceability an Empirical Study

DTIC Science & Technology

1992-09-22

procedures have been used extensively in the study of human problem-solving, including such areas as general problem-solving behavior, physics problem...heen doing unless you have traceability." " Humans don’t go back to the requirements enough." "Traceabi!ity should be extremely helpful with...by constraints on its usage: ("Traceability needs to be something that humans can work with, not just a whip held over people." "Traceability should

Using DNA origami nanorulers as traceable distance measurement standards and nanoscopic benchmark structures.

PubMed

Raab, Mario; Jusuk, Ija; Molle, Julia; Buhr, Egbert; Bodermann, Bernd; Bergmann, Detlef; Bosse, Harald; Tinnefeld, Philip

2018-01-29

In recent years, DNA origami nanorulers for superresolution (SR) fluorescence microscopy have been developed from fundamental proof-of-principle experiments to commercially available test structures. The self-assembled nanostructures allow placing a defined number of fluorescent dye molecules in defined geometries in the nanometer range. Besides the unprecedented control over matter on the nanoscale, robust DNA origami nanorulers are reproducibly obtained in high yields. The distances between their fluorescent marks can be easily analysed yielding intermark distance histograms from many identical structures. Thus, DNA origami nanorulers have become excellent reference and training structures for superresolution microscopy. In this work, we go one step further and develop a calibration process for the measured distances between the fluorescent marks on DNA origami nanorulers. The superresolution technique DNA-PAINT is used to achieve nanometrological traceability of nanoruler distances following the guide to the expression of uncertainty in measurement (GUM). We further show two examples how these nanorulers are used to evaluate the performance of TIRF microscopes that are capable of single-molecule localization microscopy (SMLM).

Practical Use Of It In Traceability In Food Value Chains

NASA Astrophysics Data System (ADS)

Ratcliff, Jon; Boddington, Michael

Traceability is today considered an essential requirement for the food value chain due to the need to provide consumers with accurate information in the event of food safety recalls, to provide assurance with regard the source and production systems for food products and in certain countries to comply with government legislation. Within an individual business traceability can be quite simple to implement, however, in a global trading market, traceability of the entire supply chain, including logistics is extremely complex. For this reason IT solutions such as TraceTracker have been developed which not only provide electronic solutions for complete traceability but also allow products to be tracked at any point in the supply chain.

Efficient hybrid metrology for focus, CD, and overlay

NASA Astrophysics Data System (ADS)

Tel, W. T.; Segers, B.; Anunciado, R.; Zhang, Y.; Wong, P.; Hasan, T.; Prentice, C.

2017-03-01

In the advent of multiple patterning techniques in semiconductor industry, metrology has progressively become a burden. With multiple patterning techniques such as Litho-Etch-Litho-Etch and Sidewall Assisted Double Patterning, the number of processing step have increased significantly and therefore, so as the amount of metrology steps needed for both control and yield monitoring. The amount of metrology needed is increasing in each and every node as more layers needed multiple patterning steps, and more patterning steps per layer. In addition to this, there is that need for guided defect inspection, which in itself requires substantially denser focus, overlay, and CD metrology as before. Metrology efficiency will therefore be cruicial to the next semiconductor nodes. ASML's emulated wafer concept offers a highly efficient method for hybrid metrology for focus, CD, and overlay. In this concept metrology is combined with scanner's sensor data in order to predict the on-product performance. The principle underlying the method is to isolate and estimate individual root-causes which are then combined to compute the on-product performance. The goal is to use all the information available to avoid ever increasing amounts of metrology.

Design, fabrication and metrological evaluation of wearable pressure sensors.

PubMed

Goy, C B; Menichetti, V; Yanicelli, L M; Lucero, J B; López, M A Gómez; Parodi, N F; Herrera, M C

2015-04-01

Pressure sensors are valuable transducers that are necessary in a huge number of medical application. However, the state of the art of compact and lightweight pressure sensors with the capability of measuring the contact pressure between two surfaces (contact pressure sensors) is very poor. In this work, several types of wearable contact pressure sensors are fabricated using different conductive textile materials and piezo-resistive films. The fabricated sensors differ in size, the textile conductor used and/or the number of layers of the sandwiched piezo-resistive film. The intention is to study, through the obtaining of their calibration curves, their metrological properties (repeatability, sensitivity and range) and determine which physical characteristics improve their ability for measuring contact pressures. It has been found that it is possible to obtain wearable contact pressure sensors through the proposed fabrication process with satisfactory repeatability, range and sensitivity; and that some of these properties can be improved by the physical characteristics of the sensors.

New high-precision deep concave optical surface manufacturing capability

NASA Astrophysics Data System (ADS)

Piché, François; Maloney, Chris; VanKerkhove, Steve; Supranowicz, Chris; Dumas, Paul; Donohue, Keith

2017-10-01

This paper describes the manufacturing steps necessary to manufacture hemispherical concave aspheric mirrors for high- NA systems. The process chain is considered from generation to final figuring and includes metrology testing during the various manufacturing steps. Corning Incorporated has developed this process by taking advantage of recent advances in commercially available Satisloh and QED Technologies equipment. Results are presented on a 100 mm concave radius nearly hemispherical (NA = 0.94) fused silica sphere with a better than 5 nm RMS figure. Part interferometric metrology was obtained on a QED stitching interferometer. Final figure was made possible by the implementation of a high-NA rotational MRF mode recently developed by QED Technologies which is used at Corning Incorporated for production. We also present results from a 75 mm concave radius (NA = 0.88) Corning ULE sphere that was produced using sub-aperture tools from generation to final figuring. This part demonstrates the production chain from blank to finished optics for high-NA concave asphere.

Multi-Tasking Non-Destructive Laser Technology in Conservation Diagnostic Procedures

NASA Astrophysics Data System (ADS)

Tornari, V.; Tsiranidou, E.; Orphanos, Y.; Falldorf, C.; Klattenhof, R.; Esposito, E.; Agnani, A.; Dabu, R.; Stratan, A.; Anastassopoulos, A.; Schipper, D.; Hasperhoven, J.; Stefanaggi, M.; Bonnici, H.; Ursu, D.

Laser metrology provides techniques that have been successfully applied in industrial structural diagnostic fields but have not yet been refined and optimised for the special investigative requirements found in cultural heritage applications. A major impediment is the partial applicability of various optical coherent techniques, each one narrowing its use down to a specific application. This characteristic is not well suited for a field that encounters a great variety of diagnostic problems ranging from movable, multiple-composition museum objects, to immovable multi-layered wall paintings, statues and wood carvings, to monumental constructions and outdoor cultural heritage sites. Various diagnostic techniques have been suggested and are uniquely suited for each of the mentioned problems but it is this fragmented suitability that obstructs the technology transfer. Since optical coherent techniques for metrology are based on fundamental principles and take advantage of similar procedures for generation of informative signals for data collection, then the imposed limits elevate our aim to identify complementary capabilities to accomplish the needed functionality.

Advanced in-line metrology strategy for self-aligned quadruple patterning

NASA Astrophysics Data System (ADS)

Chao, Robin; Breton, Mary; L'herron, Benoit; Mendoza, Brock; Muthinti, Raja; Nelson, Florence; De La Pena, Abraham; Le, Fee li; Miller, Eric; Sieg, Stuart; Demarest, James; Gin, Peter; Wormington, Matthew; Cepler, Aron; Bozdog, Cornel; Sendelbach, Matthew; Wolfling, Shay; Cardinal, Tom; Kanakasabapathy, Sivananda; Gaudiello, John; Felix, Nelson

2016-03-01

Self-Aligned Quadruple Patterning (SAQP) is a promising technique extending the 193-nm lithography to manufacture structures that are 20nm half pitch or smaller. This process adopts multiple sidewall spacer image transfers to split a rather relaxed design into a quarter of its original pitch. Due to the number of multiple process steps required for the pitch splitting in SAQP, the process error propagates through each deposition and etch, and accumulates at the final step into structure variations, such as pitch walk and poor critical dimension uniformity (CDU). They can further affect the downstream processes and lower the yield. The impact of this error propagation becomes significant for advanced technology nodes when the process specifications of device design CD requirements are at nanometer scale. Therefore, semiconductor manufacturing demands strict in-line process control to ensure a high process yield and improved performance, which must rely on precise measurements to enable corrective actions and quick decision making for process development. This work aims to provide a comprehensive metrology solution for SAQP. During SAQP process development, the challenges in conventional in-line metrology techniques start to surface. For instance, critical-dimension scanning electron microscopy (CDSEM) is commonly the first choice for CD and pitch variation control. However, it is found that the high aspect ratio at mandrel level processes and the trench variations after etch prevent the tool from extracting the true bottom edges of the structure in order to report the position shift. On the other hand, while the complex shape and variations can be captured with scatterometry, or optical CD (OCD), the asymmetric features, such as pitch walk, show low sensitivity with strong correlations in scatterometry. X-ray diffraction (XRD) is known to provide useful direct measurements of the pitch walk in crystalline arrays, yet the data analysis is influenced by the incoming geometry and must be used carefully. A successful implementation of SAQP process control for yield improvement requires the metrology issues to be addressed. By optimizing the measurement parameters and beam configurations, CDSEM measurements distinguish each of the spaces corresponding to the upstream mandrel processes and report their CDs separately to feed back to the process team for the next development cycle. We also utilize the unique capability in scatterometry to measure the structure details in-line and implement a "predictive" process control, which shows a good correlation between the "predictive" measurement and the cross-sections from our design of experiments (DOE). The ability to measure the pitch walk in scatterometry was also demonstrated. This work also explored the frontier of in-line XRD capability by enabling an automatic RSM fitting on tool to output pitch walk values. With these advances in metrology development, we are able to demonstrate the impacts of in-line monitoring in the SAQP process, to shorten the patterning development learning cycle to improve the yield.

Implementation of machine learning for high-volume manufacturing metrology challenges (Conference Presentation)

NASA Astrophysics Data System (ADS)

Timoney, Padraig; Kagalwala, Taher; Reis, Edward; Lazkani, Houssam; Hurley, Jonathan; Liu, Haibo; Kang, Charles; Isbester, Paul; Yellai, Naren; Shifrin, Michael; Etzioni, Yoav

2018-03-01

In recent years, the combination of device scaling, complex 3D device architecture and tightening process tolerances have strained the capabilities of optical metrology tools to meet process needs. Two main categories of approaches have been taken to address the evolving process needs. In the first category, new hardware configurations are developed to provide more spectral sensitivity. Most of this category of work will enable next generation optical metrology tools to try to maintain pace with next generation process needs. In the second category, new innovative algorithms have been pursued to increase the value of the existing measurement signal. These algorithms aim to boost sensitivity to the measurement parameter of interest, while reducing the impact of other factors that contribute to signal variability but are not influenced by the process of interest. This paper will evaluate the suitability of machine learning to address high volume manufacturing metrology requirements in both front end of line (FEOL) and back end of line (BEOL) sectors from advanced technology nodes. In the FEOL sector, initial feasibility has been demonstrated to predict the fin CD values from an inline measurement using machine learning. In this study, OCD spectra were acquired after an etch process that occurs earlier in the process flow than where the inline CD is measured. The fin hard mask etch process is known to impact the downstream inline CD value. Figure 1 shows the correlation of predicted CD vs downstream inline CD measurement obtained after the training of the machine learning algorithm. For BEOL, machine learning is shown to provide an additional source of information in prediction of electrical resistance from structures that are not compatible for direct copper height measurement. Figure 2 compares the trench height correlation to electrical resistance (Rs) and the correlation of predicted Rs to the e-test Rs value for a far back end of line (FBEOL) metallization level across 3 products. In the case of product C, it is found that the predicted Rs correlation to the e-test value is significantly improved utilizing spectra acquired at the e-test structure. This paper will explore the considerations required to enable use of machine learning derived metrology output to enable improved process monitoring and control. Further results from the FEOL and BEOL sectors will be presented, together with further discussion on future proliferation of machine learning based metrology solutions in high volume manufacturing.

75 FR 24569 - Animal Traceability; Public Meetings

Federal Register 2010, 2011, 2012, 2013, 2014

2010-05-05

... DEPARTMENT OF AGRICULTURE Animal and Plant Health Inspection Service [Docket No. APHIS-2010-0050] Animal Traceability; Public Meetings AGENCY: Animal and Plant Health Inspection Service, USDA. ACTION... input on the new framework being developed for animal disease traceability. Additional meetings are...

75 FR 33576 - Animal Traceability; Public Meetings

Federal Register 2010, 2011, 2012, 2013, 2014

2010-06-14

... DEPARTMENT OF AGRICULTURE Animal and Plant Health Inspection Service [Docket No. APHIS-2010-0050] Animal Traceability; Public Meetings AGENCY: Animal and Plant Health Inspection Service, USDA. ACTION... the new framework being developed for animal disease traceability. The meetings are being organized by...

75 FR 47769 - Animal Traceability; Public Meetings

Federal Register 2010, 2011, 2012, 2013, 2014

2010-08-09

... DEPARTMENT OF AGRICULTURE Animal and Plant Health Inspection Service [Docket No. APHIS-2010-0050] Animal Traceability; Public Meetings AGENCY: Animal and Plant Health Inspection Service, USDA. ACTION... the new framework being developed for animal disease traceability. The meetings are being organized by...

40 CFR 1065.301 - Overview and general provisions.

Code of Federal Regulations, 2013 CFR

2013-07-01

... judgment. (d) Use NIST-traceable standards to the tolerances we specify for calibrations and verifications. Where we specify the need to use NIST-traceable standards, you may alternatively ask for our approval to use international standards that are not NIST-traceable. ...

40 CFR 1065.301 - Overview and general provisions.

Code of Federal Regulations, 2012 CFR

2012-07-01

... judgment. (d) Use NIST-traceable standards to the tolerances we specify for calibrations and verifications. Where we specify the need to use NIST-traceable standards, you may alternatively ask for our approval to use international standards that are not NIST-traceable. ...

40 CFR 1065.301 - Overview and general provisions.

Code of Federal Regulations, 2010 CFR

2010-07-01

... judgment. (d) Use NIST-traceable standards to the tolerances we specify for calibrations and verifications. Where we specify the need to use NIST-traceable standards, you may alternatively ask for our approval to use international standards that are not NIST-traceable. ...

40 CFR 1065.301 - Overview and general provisions.

Code of Federal Regulations, 2014 CFR

2014-07-01

... judgment. (d) Use NIST-traceable standards to the tolerances we specify for calibrations and verifications. Where we specify the need to use NIST-traceable standards, you may alternatively ask for our approval to use international standards that are not NIST-traceable. ...

40 CFR 1065.301 - Overview and general provisions.

Code of Federal Regulations, 2011 CFR

2011-07-01

... judgment. (d) Use NIST-traceable standards to the tolerances we specify for calibrations and verifications. Where we specify the need to use NIST-traceable standards, you may alternatively ask for our approval to use international standards that are not NIST-traceable. ...

Optical metrology for Starlight Separated Spacecraft Stellar Interferometry Mission

NASA Technical Reports Server (NTRS)

Dubovitsky, S.; Lay, O. P.; Peters, R. D.; Abramovici, A.; Asbury, C. G.; Kuhnert, A. C.; Mulder, J. L.

2002-01-01

We describe a high-precision inter-spacecraft metrology system designed for NASA 's StarLight mission, a space-based separated-spacecraft stellar interferometer. It consists of dual-target linear metrology, based on a heterodyne interferometer with carrier phase modulation, and angular metrology designed to sense the pointing of the laser beam and provides bearing information. The dual-target operation enables one metrology beam to sense displacement of two targets independently. We present the current design, breadboard implementation of the Metrology Subsystem in a stellar interferometer testbed and the present state of development of flight qualifiable subsystem components.

Picometer Level Modeling of a Shared Vertex Double Corner Cube in the Space Interferometry Mission Kite Testbed

NASA Technical Reports Server (NTRS)

Kuan, Gary M.; Dekens, Frank G.

2006-01-01

The Space Interferometry Mission (SIM) is a microarcsecond interferometric space telescope that requires picometer level precision measurements of its truss and interferometer baselines. Single-gauge metrology errors due to non-ideal physical characteristics of corner cubes reduce the angular measurement capability of the science instrument. Specifically, the non-common vertex error (NCVE) of a shared vertex, double corner cube introduces micrometer level single-gauge errors in addition to errors due to dihedral angles and reflection phase shifts. A modified SIM Kite Testbed containing an articulating double corner cube is modeled and the results are compared to the experimental testbed data. The results confirm modeling capability and viability of calibration techniques.

Evaluation of the Time and Frequency Transfer Capabilities of a Network of GNSS Receivers Located in Timing Laboratories

DTIC Science & Technology

2009-11-01

metrology, different techniques are used for time and frequency transfer, basically TWSTFT (Two-Way Satellite Time and Frequency Transfer), GPS CV (Common...traditional GPS/GLONASS CV/AV receivers and TWSTFT equipment. Time and frequency transfer using GPS code and carrier-phase is an important...or mixing GPS geodetic results with other independent techniques, such as the TWSTFT . 41 st Annual Precise Time and Time Interval (PTTI

Comparison of two metrological approaches for the prediction of human haptic perception

NASA Astrophysics Data System (ADS)

Neumann, Annika; Frank, Daniel; Vondenhoff, Thomas; Schmitt, Robert

2016-06-01

Haptic perception is regarded as a key component of customer appreciation and acceptance for various products. The prediction of customers’ haptic perception is of interest both during product development and production phases. This paper presents the results of a multivariate analysis between perceived roughness and texture related surface measurements, to examine whether perceived roughness can be accurately predicted using technical measurements. Studies have shown that standardized measurement parameters, such as the roughness coefficients (e.g. Rz or Ra), do not show a one-dimensional linear correlation with the human perception (of roughness). Thus, an alternative measurement method was compared to standard measurements of roughness, in regard to its capability of predicting perceived roughness through technical measurements. To estimate perceived roughness, an experimental study was conducted in which 102 subjects evaluated four sets of 12 different geometrical surface structures regarding their relative perceived roughness. The two different metrological procedures were examined in relation to their capability to predict the perceived roughness of the subjects stated within the study. The standardized measurements of the surface roughness were made using a structured light 3D-scanner. As an alternative method, surface induced vibrations were measured by a finger-like sensor during robot-controlled traverse over a surface. The presented findings provide a better understanding of the predictability of human haptic perception using technical measurements.

Capabilities of a New Pressure Controller for Gas-Controlled Heat Pipes

NASA Astrophysics Data System (ADS)

Giunta, S.; Merlone, A.; Marenco, S.; Marcarino, P.; Tiziani, A.

2008-10-01

Pressure control is used in many metrological applications and for the control of thermodynamic quantities. At the Italian National Research Institute of Metrology (INRiM), a new pressure controller has been designed and assembled, operating in the pressure range between 4 kPa and 400 kPa. This innovative instrument uses a commercial pressure transducer with a sensitivity of 10-4 and several electro-valves interposed among calibrated volumes of different dimensions in order to realize known ratios for very fine pressure changes. The device is provided with several circuits to drive the electro-valve actions, for signal processing and transmission, and for both manual and automatic control. Input/output peripherals, such as a 4 × 20 dot matrix display and a 4 × 4 keyboard, allow setting of the parameters and data visualization, while a remote control port allows interfacing with a computer. The operating principle of this pressure controller has been recently applied, with excellent results, to control the pressure in gas-controlled heat pipes by using a standard platinum resistance thermometer as a temperature/pressure sensor, achieving in this case a relative sensitivity better than 10-6 in pressure. Several tests were also made to control the pressure by means of a commercial sensor. The device, its main components, and its capabilities are here reported, together with application tests and results.

40 CFR 1065.315 - Pressure, temperature, and dewpoint calibration.

Code of Federal Regulations, 2011 CFR

2011-07-01

... quantities that are NIST-traceable within 0.5% uncertainty. (2) Temperature. We recommend digital dry-block... errors. We recommend using calibration reference quantities that are NIST-traceable within 0.5... NIST-traceable simulator that is independently calibrated and, as appropriate, cold-junction...

40 CFR 1065.315 - Pressure, temperature, and dewpoint calibration.

Code of Federal Regulations, 2010 CFR

2010-07-01

... quantities that are NIST-traceable within 0.5% uncertainty. (2) Temperature. We recommend digital dry-block... errors. We recommend using calibration reference quantities that are NIST-traceable within 0.5... NIST-traceable simulator that is independently calibrated and, as appropriate, cold-junction...

40 CFR 1065.315 - Pressure, temperature, and dewpoint calibration.

Code of Federal Regulations, 2012 CFR

2012-07-01

... quantities that are NIST-traceable within 0.5% uncertainty. (2) Temperature. We recommend digital dry-block... errors. We recommend using calibration reference quantities that are NIST-traceable within 0.5... NIST-traceable simulator that is independently calibrated and, as appropriate, cold-junction...

40 CFR 1065.315 - Pressure, temperature, and dewpoint calibration.

Code of Federal Regulations, 2014 CFR

2014-07-01

... quantities that are NIST-traceable within 0.5% uncertainty. (2) Temperature. We recommend digital dry-block... errors. We recommend using calibration reference quantities that are NIST-traceable within 0.5... NIST-traceable simulator that is independently calibrated and, as appropriate, cold-junction...

40 CFR 1065.315 - Pressure, temperature, and dewpoint calibration.

Code of Federal Regulations, 2013 CFR

2013-07-01

... quantities that are NIST-traceable within 0.5% uncertainty. (2) Temperature. We recommend digital dry-block... errors. We recommend using calibration reference quantities that are NIST-traceable within 0.5... NIST-traceable simulator that is independently calibrated and, as appropriate, cold-junction...

Traceability of radiation protection instruments

NASA Astrophysics Data System (ADS)

Hino, Y.; Kurosawa, T.

2007-08-01

Radiation protection instruments are used in daily measurement of dose and activities in workplaces and environments for safety management. The requirements for calibration certificates with traceability are increasing for these instruments to ensure the consistency and reliabilities of the measurement results. The present traceability scheme of radiation protection instruments for dose and activity measurements is described with related IEC/ISO requirements. Some examples of desirable future calibration systems with recent new technologies are also discussed to establish the traceability with reasonable costs and reliabilities.

Methods for accurate cold-chain temperature monitoring using digital data-logger thermometers

NASA Astrophysics Data System (ADS)

Chojnacky, M. J.; Miller, W. M.; Strouse, G. F.

2013-09-01

Complete and accurate records of vaccine temperature history are vital to preserving drug potency and patient safety. However, previously published vaccine storage and handling guidelines have failed to indicate a need for continuous temperature monitoring in vaccine storage refrigerators. We evaluated the performance of seven digital data logger models as candidates for continuous temperature monitoring of refrigerated vaccines, based on the following criteria: out-of-box performance and compliance with manufacturer accuracy specifications over the range of use; measurement stability over extended, continuous use; proper setup in a vaccine storage refrigerator so that measurements reflect liquid vaccine temperatures; and practical methods for end-user validation and establishing metrological traceability. Data loggers were tested using ice melting point checks and by comparison to calibrated thermocouples to characterize performance over 0 °C to 10 °C. We also monitored logger performance in a study designed to replicate the range of vaccine storage and environmental conditions encountered at provider offices. Based on the results of this study, the Centers for Disease Control released new guidelines on proper methods for storage, handling, and temperature monitoring of vaccines for participants in its federally-funded Vaccines for Children Program. Improved temperature monitoring practices will ultimately decrease waste from damaged vaccines, improve consumer confidence, and increase effective inoculation rates.

Static and (quasi)dynamic calibration of stroboscopic scanning white light interferometer

NASA Astrophysics Data System (ADS)

Seppä, Jeremias; Kassamakov, Ivan; Nolvi, Anton; Heikkinen, Ville; Paulin, Tor; Lassila, Antti; Hao, Ling; Hæggsröm, Edward

2013-04-01

A scanning white light interferometer can characterize out of plane features and motion in M(N)EMS devices. Like any other form and displacement measuring instrument, the scanning interferometer results should be linked to the metre definition to be comparable and unambiguous. Traceability is built up by careful error characterization and calibration of the interferometer. The main challenge in this calibration is to have a reference device producing accurate and reproducible dynamic out-of-plane displacement when submitted to standard loads. We use a flat mirror attached to a piezoelectric transducer for static and (quasi)dynamic calibration of a stroboscopic scanning light interferometer. First we calibrated the piezo-scanned flexure guided transducer stage using a symmetric differential heterodyne laser interferometer developed at the Centre for Metrology and Accreditation (MIKES). The standard uncertainty of the piezo stage motion calibration was 3.0 nm. Then we used the piezo-stage as a transfer standard to calibrate our stroboscopic interferometer whose light source was pulsed at 200 Hz and 400 Hz with 0.5% duty cycle. We measured the static position and (quasi)dynamic motion of the attached mirror relative to a reference surface. This methodology permits calibrating the vertical scale of the stroboscopic scanning white light interferometer.

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

NASA Astrophysics Data System (ADS)

Hansen, Poul-Erik; Madsen, Morten H.; Lehtolahti, Joonas; Nielsen, Lars

2017-11-01

Dimensional measurements of multi-patterned transmission gratings with a mixture of long and small periods are great challenges for optical metrology today. It is a further challenge when the aspect ratio of the structures is high, that is, when the height of structures is larger than the pitch. Here we consider a double patterned transmission grating with pitches of 500 nm and 20 000 nm. For measuring the geometrical properties of double patterned transmission grating we use a combined spectroscopic Mueller polarimetry and scatterometry setup. For modelling the experimentally obtained data we rigorously compute the scattering signal by solving Maxwell's equations using the RCWA method on a supercell structure. We also present a new method for analyzing the Mueller polarimetry parameters that performs the analysis in the measured variables. This new inversion method for finding the best fit between measured and calculated values are tested on silicon gratings with periods from 300 to 600 nm. The method is shown to give results within the expanded uncertainty of reference AFM measurements. The application of the new inversion method and the supercell structure to the double patterned transmission grating gives best estimates of dimensional quantities that are in fair agreement with those derived from local AFM measurements

Research on effects of baffle position in an integrating sphere on the luminous flux measurement

NASA Astrophysics Data System (ADS)

Lin, Fangsheng; Li, Tiecheng; Yin, Dejin; Lai, Lei; Xia, Ming

2016-09-01

In the field of optical metrology, luminous flux is an important index to characterize the quality of electric light source. Currently, the majority of luminous flux measurement is based on the integrating sphere method, so measurement accuracy of integrating sphere is the key factor. There are plenty of factors affecting the measurement accuracy, such as coating, power and the position of light source. However, the baffle which is a key part of integrating sphere has important effects on the measurement results. The paper analyzes in detail the principle of an ideal integrating sphere. We use moving rail to change the relative position of baffle and light source inside the sphere. By experiments, measured luminous flux values at different distances between the light source and baffle are obtained, which we used to take analysis of the effects of different baffle position on the measurement. By theoretical calculation, computer simulation and experiment, we obtain the optimum position of baffle for luminous flux measurements. Based on the whole luminous flux measurement error analysis, we develop the methods and apparatus to improve the luminous flux measurement accuracy and reliability. It makes our unifying and transferring work of the luminous flux more accurate in East China and provides effective protection for our traceability system.

Frequency-response mismatch effects in Johnson noise thermometry

NASA Astrophysics Data System (ADS)

White, D. R.; Qu, J.-F.

2018-02-01

Johnson noise thermometry is of considerable interest at present due to the planned redefinition of the kelvin in 2019, and several determinations of the Boltzmann constant have recently been published in support of the redefinition. To determine the Boltzmann constant by noise thermometry, the thermal noise from a sensing resistor at the triple point of water is compared to a pseudo-random noise with a calculable power spectral density traceable to quantum electrical standards. In all the measurements to date, the two dominant sources of measurement uncertainty are strongly influenced by a single factor: the frequency-response mismatch between the sets of leads connecting the thermometer to the two noise sources. In the most recent determination at the National Institute of Metrology, China, substantial changes were made to the connecting leads to reduce the mismatch effects. The aims of this paper are, firstly, to describe and explain the rationale for the changes, and secondly, to better understand the effects of the least-squares fits and the bias-variance compromise in the analysis of measurements affected by the mismatch effects. While significant improvements can be made to the connecting leads to lessen the effects of the frequency-response mismatch, the efforts are unlikely to be rewarded by a significant increase in bandwidth or a significant reduction in uncertainty.

Proceedings of the November 2011 Traceability Research Summit: this report is the third in a series on Traceability Summits sponsored by IFT beginning in July 2011.

PubMed

Hickey, Caitlin; Bhatt, Tejas

2013-12-01

Fifty thought leaders in the area of food traceability met for a 3rd time to discuss methodologies and finalize the principles that define their vision for traceability. Participants in the summit included representatives from industry, trade associations, government, academia, consumer groups, and more. One main focus of this summit included a discussion on the current regulations and voluntary initiatives in place regarding traceability. Overall, it was recognized that the recommendations from this summit group would be more specific and stringent in comparison to these current regulations and initiatives. The participants sought to be leaders in the traceability arena, with their recommendations leading the industry to optimal traceability systems and methods. Participants agreed on many principles for their vision of traceability, emphasizing the importance of access to traceability data. They discussed having industry be asked for "basic" tracing data prior to the need for a large-scale investigation, having standards for sharing data, and having the data in electronic form. Participants foresaw the importance of capturing data electronically in the future, although they recognized that many firms do not currently do this. The group also saw a need for a transition period to implement changes, and to provide implementation training and resource aid to small businesses. Summit participants discussed specific definitions and examples for key data elements and critical tracking events that could be used by industry to capture tracing data at specific points within the supply chain. Overall, participants refined the goals of the summit group and started to identify specific ways to achieve those goals. © 2013 Institute of Food Technologists®

Improving Metrological Reliability of Information-Measuring Systems Using Mathematical Modeling of Their Metrological Characteristics

NASA Astrophysics Data System (ADS)

Kurnosov, R. Yu; Chernyshova, T. I.; Chernyshov, V. N.

2018-05-01

The algorithms for improving the metrological reliability of analogue blocks of measuring channels and information-measuring systems are developed. The proposed algorithms ensure the optimum values of their metrological reliability indices for a given analogue circuit block solution.

A PetriNet-Based Approach for Supporting Traceability in Cyber-Physical Manufacturing Systems

PubMed Central

Huang, Jiwei; Zhu, Yeping; Cheng, Bo; Lin, Chuang; Chen, Junliang

2016-01-01

With the growing popularity of complex dynamic activities in manufacturing processes, traceability of the entire life of every product has drawn significant attention especially for food, clinical materials, and similar items. This paper studies the traceability issue in cyber-physical manufacturing systems from a theoretical viewpoint. Petri net models are generalized for formulating dynamic manufacturing processes, based on which a detailed approach for enabling traceability analysis is presented. Models as well as algorithms are carefully designed, which can trace back the lifecycle of a possibly contaminated item. A practical prototype system for supporting traceability is designed, and a real-life case study of a quality control system for bee products is presented to validate the effectiveness of the approach. PMID:26999141

Importance of Requirements Analysis & Traceability to Improve Software Quality and Reduce Cost and Risk

NASA Technical Reports Server (NTRS)

Kapoor, Manju M.; Mehta, Manju

2010-01-01

The goal of this paper is to emphasize the importance of developing complete and unambiguous requirements early in the project cycle (prior to Preliminary Design Phase). Having a complete set of requirements early in the project cycle allows sufficient time to generate a traceability matrix. Requirements traceability and analysis are the key elements in improving verification and validation process, and thus overall software quality. Traceability can be most beneficial when the system changes. If changes are made to high-level requirements it implies that low-level requirements need to be modified. Traceability ensures that requirements are appropriately and efficiently verified at various levels whereas analysis ensures that a rightly interpreted set of requirements is produced.

A PetriNet-Based Approach for Supporting Traceability in Cyber-Physical Manufacturing Systems.

PubMed

Huang, Jiwei; Zhu, Yeping; Cheng, Bo; Lin, Chuang; Chen, Junliang

2016-03-17

With the growing popularity of complex dynamic activities in manufacturing processes, traceability of the entire life of every product has drawn significant attention especially for food, clinical materials, and similar items. This paper studies the traceability issue in cyber-physical manufacturing systems from a theoretical viewpoint. Petri net models are generalized for formulating dynamic manufacturing processes, based on which a detailed approach for enabling traceability analysis is presented. Models as well as algorithms are carefully designed, which can trace back the lifecycle of a possibly contaminated item. A practical prototype system for supporting traceability is designed, and a real-life case study of a quality control system for bee products is presented to validate the effectiveness of the approach.

Reducing measurement uncertainty drives the use of multiple technologies for supporting metrology

NASA Astrophysics Data System (ADS)

Banke, Bill, Jr.; Archie, Charles N.; Sendelbach, Matthew; Robert, Jim; Slinkman, James A.; Kaszuba, Phil; Kontra, Rick; DeVries, Mick; Solecky, Eric P.

2004-05-01

Perhaps never before in semiconductor microlithography has there been such an interest in the accuracy of measurement. This interest places new demands on our in-line metrology systems as well as the supporting metrology for verification. This also puts a burden on the users and suppliers of new measurement tools, which both challenge and complement existing manufacturing metrology. The metrology community needs to respond to these challenges by using new methods to assess the fab metrologies. An important part of this assessment process is the ability to obtain accepted reference measurements as a way of determining the accuracy and Total Measurement Uncertainty (TMU) of an in-line critical dimension (CD). In this paper, CD can mean any critical dimension including, for example, such measures as feature height or sidewall angle. This paper describes the trade-offs of in-line metrology systems as well as the limitations of Reference Measurement Systems (RMS). Many factors influence each application such as feature shape, material properties, proximity, sampling, and critical dimension. These factors, along with the metrology probe size, interaction volume, and probe type such as e-beam, optical beam, and mechanical probe, are considered. As the size of features shrinks below 100nm some of the stalwarts of reference metrology come into question, such as the electrically determined transistor gate length. The concept of the RMS is expanded to show how multiple metrologies are needed to achieve the right balance of accuracy and sampling. This is also demonstrated for manufacturing metrology. Various comparisons of CDSEM, scatterometry, AFM, cross section SEM, electrically determined CDs, and TEM are shown. An example is given which demonstrates the importance in obtaining TMU by balancing accuracy and precision for selecting manufacturing measurement strategy and optimizing manufacturing metrology. It is also demonstrated how the necessary supporting metrology will bring together formerly unlinked technology fields requiring new measurement science. The emphasis on accuracy will increase the importance and role of NIST and similar metrology organizations in supporting the semiconductor industry in this effort.

Proceedings of a Meeting on Traceability for Ionizing Radiation Measurements

NASA Astrophysics Data System (ADS)

Heaton, H. T., II

1982-02-01

General concepts for traceability were presented from several perspectives. The national standards for radiation dosimetry, radioactivity measurements, and neutron measurements were described. Specific programs for achieving traceability to the national standards for radiation measurements in medical, occupational, and environmental applications were summarized.

Whole-chain traceability, is it possible to trace your hamburger to a particular steer, a U. S. perspective.

PubMed

Crandall, Philip G; O'Bryan, Corliss A; Babu, Dinesh; Jarvis, Nathan; Davis, Mike L; Buser, Michael; Adam, Brian; Marcy, John; Ricke, Steven C

2013-10-01

Traceability through the entire food supply chain from conception to consumption is a pressing need for the food industry, consumers and government regulators. A robust, whole-chain traceability system is needed that will effectively address food quality, food safety and food defense issues by providing real-time, transparent and reliable information from beef production through slaughter and distribution to the consumer. Traceability is an expanding part of the food safety continuum that minimizes the risk of foodborne diseases, assures quality and cold-chain integrity. Traceability can be a positive competitive marketing edge for beef producers who can verify specific quality attributes such as humane production or grass fed or Certified Organic. In this review we address the benefits as well as the remaining issues for whole-chain traceability in the beef industry, with particular focus on ground beef for the markets in the United States. Copyright © 2013 Elsevier Ltd. All rights reserved.

Making traceability work across the entire food supply chain.

PubMed

Bhatt, Tejas; Buckley, Greg; McEntire, Jennifer C; Lothian, Paul; Sterling, Brian; Hickey, Caitlin

2013-12-01

The Institute of Food Technologists held Traceability Research Summits on July 14, August 22, and November 1, 2011, to address how to meet the growing requirement for agriculture and food traceability. Each meeting had a group of about 50 individuals who came from food companies, trade associations, local, state, and federal governments, 3rd-party traceability solution providers, not-for-profit corporations, consultants, and consumer groups. They discussed and deliberated the objectives of traceability and the means to develop product tracing in the food system. A total of 70 people participated in the 3 summits. These individuals were invited to participate in a small workgroup responsible for considering the details related to product tracing and presenting draft concepts to the larger group on November 1, 2011, in Chicago. During this meeting, the larger assembly further refined the concepts and came to an agreement on the basic principles and overall design of the desired approach to traceability. © 2013 Institute of Food Technologists®

Mask Design for the Space Interferometry Mission Internal Metrology

NASA Technical Reports Server (NTRS)

Marx, David; Zhao, Feng; Korechoff, Robert

2005-01-01

This slide presentation reviews the mask design used for the internal metrology of the Space Interferometry Mission (SIM). Included is information about the project, the method of measurements with SIM, the internal metrology, numerical model of internal metrology, wavefront examples, performance metrics, and mask design

Worldwide Space Launch Vehicles and Their Mainstage Liquid Rocket Propulsion

NASA Technical Reports Server (NTRS)

Rahman, Shamim A.

2010-01-01

Space launch vehicle begins with a basic propulsion stage, and serves as a missile or small launch vehicle; many are traceable to the 1945 German A-4. Increasing stage size, and increasingly energetic propulsion allows for heavier payloads and greater. Earth to Orbit lift capability. Liquid rocket propulsion began with use of storable (UDMH/N2O4) and evolved to high performing cryogenics (LOX/RP, and LOX/LH). Growth versions of SLV's rely on strap-on propulsive stages of either solid propellants or liquid propellants.

Selected Tether Applications Cost Model

NASA Technical Reports Server (NTRS)

Keeley, Michael G.

1988-01-01

Diverse cost-estimating techniques and data combined into single program. Selected Tether Applications Cost Model (STACOM 1.0) is interactive accounting software tool providing means for combining several independent cost-estimating programs into fully-integrated mathematical model capable of assessing costs, analyzing benefits, providing file-handling utilities, and putting out information in text and graphical forms to screen, printer, or plotter. Program based on Lotus 1-2-3, version 2.0. Developed to provide clear, concise traceability and visibility into methodology and rationale for estimating costs and benefits of operations of Space Station tether deployer system.

Cargo Movement Operations System (CMOS) Requirements Traceability Matrix, ECP. Version 2

DTIC Science & Technology

1990-06-07

NO [ ] COMMENT DISPOSITION: COMMENT STATUS: OPEN ( ] CLOSED [ ] ORIGINATOR CONTROL NUMBER: RTM2-0003 PROGRAM OFFICE CONTROL NUMBER: DATA ITEM DISCREPANCY WORKSHEET CDRL NUMBER: A018-02A DATE: 06/07/90 ORIGINATOR NAME: Patrick L. Combs OFFICE SYMBOL: SAIC TELEPHONE NUMBER: 272-2999 SUBSTANTIVE: X EDITORIAL: PAGE NUMBER: E-25 PARA NUMBER: SC122 COMMENT OR RECOMMENDED CHANGE: Delete SS0850 and SS0851 from SC122. RATIONALE: These requirements are not present in all the subordinate system capabilities and, therefore, should not be allocated to

78 FR 2039 - Traceability for Livestock Moving Interstate

Federal Register 2010, 2011, 2012, 2013, 2014

2013-01-09

... Inspection Service 9 CFR Parts 71, 77, 78, et al. Traceability for Livestock Moving Interstate; Final Rule #0..., and 86 [Docket No. APHIS-2009-0091] RIN 0579-AD24 Traceability for Livestock Moving Interstate AGENCY: Animal and Plant Health Inspection Service, USDA. ACTION: Final rule. SUMMARY: We are amending the...

76 FR 50081 - Traceability for Livestock Moving Interstate

Federal Register 2010, 2011, 2012, 2013, 2014

2011-08-11

... Inspection Service 9 CFR Parts 71, 77, 78, et al. Traceability for Livestock Moving Interstate; Proposed Rule... 90 [Docket No. APHIS-2009-0091] RIN 0579-AD24 Traceability for Livestock Moving Interstate AGENCY: Animal and Plant Health Inspection Service, USDA. ACTION: Proposed rule. SUMMARY: We are proposing to...

Cattle traceability system in Japan for bovine spongiform encephalopathy.

PubMed

Sugiura, Katsuaki; Onodera, Takashi

2008-01-01

To promote consumer confidence in the safety of beef and to ensure the proper implementation of eradication measures against bovine spongiform encephalopathy (BSE), the Cattle Traceability Law was approved by the Diet in June 2003 and a cattle traceability system has been in operation in Japan since December 2003. The system enables tracing the cohort and offspring animals of a BSE case within 24 h of its detection. The traceability database system also provides distributors, restaurants and consumers with information on the cattle from which the beef that they sell, serve and consume, originate.

Study on Full Supply Chain Quality and Safetytraceability Systems For Cereal And Oilproducts

NASA Astrophysics Data System (ADS)

Liu, Shihong; Zheng, Huoguo; Meng, Hong; Hu, Haiyan; Wu, Jiangshou; Li, Chunhua

Global food industry and Governments in many countries are putting increasing emphasis on establishment of food traceability systems. Food traceability has become an effective way in food safety management. Aimed at the major quality problems of cereal and oil products existing in the production, processing, warehousing, distribution and other links in the supply chain, this paper firstly proposes a new traceability framework combines the information flow with critical control points and quality indicators. Then it introduces traceability database design and data access mode to realize the framework. In practice, Code design for tracing goods is a challenge thing, so this paper put forward a code system based on UCC/EAN-128 standard.Middleware and Electronic terminal design are also briefly introduced to accomplish traceability system for cereal and oil products.

Traceability of Boletaceae mushrooms using data fusion of UV-visible and FTIR combined with chemometrics methods.

PubMed

Yao, Sen; Li, Tao; Liu, HongGao; Li, JieQing; Wang, YuanZhong

2018-04-01

Boletaceae mushrooms are wild-grown edible mushrooms that have high nutrition, delicious flavor and large economic value distributing in Yunnan Province, China. Traceability is important for the authentication and quality assessment of Boletaceae mushrooms. In this study, UV-visible and Fourier transform infrared (FTIR) spectroscopies were applied for traceability of 247 Boletaceae mushroom samples in combination with chemometrics. Compared with a single spectroscopy technique, data fusion strategy can obviously improve the classification performance in partial least square discriminant analysis (PLS-DA) and grid-search support vector machine (GS-SVM) models, for both species and geographical origin traceability. In addition, PLS-DA and GS-SVM models can provide 100.00% accuracy for species traceability and have reliable evaluation parameters. For geographical origin traceability, the accuracy of prediction in the PLS-DA model by data fusion was just 64.63%, but the GS-SVM model based on data fusion was 100.00%. The results demonstrated that the data fusion strategy of UV-visible and FTIR combined with GS-SVM could provide a higher synergic effect for traceability of Boletaceae mushrooms and have a good generalization ability for the comprehensive quality control and evaluation of similar foods. © 2017 Society of Chemical Industry. © 2017 Society of Chemical Industry.

Traceability in hardness measurements: from the definition to industry

NASA Astrophysics Data System (ADS)

Germak, Alessandro; Herrmann, Konrad; Low, Samuel

2010-04-01

The measurement of hardness has been and continues to be of significant importance to many of the world's manufacturing industries. Conventional hardness testing is the most commonly used method for acceptance testing and production quality control of metals and metallic products. Instrumented indentation is one of the few techniques available for obtaining various property values for coatings and electronic products in the micrometre and nanometre dimensional scales. For these industries to be successful, it is critical that measurements made by suppliers and customers agree within some practical limits. To help assure this measurement agreement, a traceability chain for hardness measurement traceability from the hardness definition to industry has developed and evolved over the past 100 years, but its development has been complicated. A hardness measurement value not only requires traceability of force, length and time measurements but also requires traceability of the hardness values measured by the hardness machine. These multiple traceability paths are needed because a hardness measurement is affected by other influence parameters that are often difficult to identify, quantify and correct. This paper describes the current situation of hardness measurement traceability that exists for the conventional hardness methods (i.e. Rockwell, Brinell, Vickers and Knoop hardness) and for special-application hardness and indentation methods (i.e. elastomer, dynamic, portables and instrumented indentation).

JWST Mirror Technology Development Results

NASA Technical Reports Server (NTRS)

Stahl, H. Philip

2007-01-01

Mirror technology is a critical enabling capability for the James Webb Space Telescope (JWST). JWST requires a Primary Mirror Segment Assembly (PMSA) that can survive launch, deploy and align itself to form a 25 square meter collecting area 6.5 meter diameter primary mirror with a 131 nm rms wavefront error at temperatures less than 50K and provide stable optical performance. At the inception of JWST in 1996, such a capability did not exist. A highly successful technology development program was initiated including the Sub-scale Beryllium Mirror Demonstrator (SBMD) and Advanced Mirror System Demonstrator (AMSD) projects. These projects along with flight program activities have matured and demonstrated mirror technology for JWST. Directly traceable prototypes or flight hardware has been built, tested and operated in a relevant environment. This paper summarizes that technology development effort.

Sources and performance criteria of uncertainty of reference measurement procedures.

PubMed

Mosca, Andrea; Paleari, Renata

2018-05-29

This article wants to focus on the today available Reference Measurement Procedures (RMPs) for the determination of various analytes in Laboratory Medicine and the possible tools to evaluate their performance in the laboratories who are currently using them. A brief review on the RMPs has been performed by investigating the Joint Committee for Traceability in Laboratory Medicine (JCTLM) database. In order to evaluate their performances, we have checked the organization of three international ring trials, i.e. those regularly performed by the IFCC External Quality assessment scheme for Reference Laboratories in Laboratory Medicine (RELA), by the Center for Disease Control and Prevention (CDC) cholesterol network and by the IFCC Network for HbA 1c . Several RMPs are available through the JCTLM database, but the best way to collect information about the RMPs and their uncertainties is to look at the reference measurement service providers (RMS). This part of the database and the background on how to listed in the database is very helpful for the assessment of expanded uncertainty (MU) and performance in general of RMPs. Worldwide, 17 RMS are listed in the database, and for most of the measurands more than one RMS is able to run the relative RMPs, with similar expanded uncertainties. As an example, for a-amylase, 4 SP offer their services with MU between 1.6 and 3.3%. In other cases (such as total cholesterol, the U may span over a broader range, i.e. from 0.02 to 3.6%). With regard to the performance evaluation, the approach is often heterogenous, and it is difficult to compare the performance of laboratories running the same RMP for the same measurand if involved in more than one EQAS. The reference measurement services have been created to help laboratory professionals and manufacturers to implement the correct metrological traceability, and the JCTLM database is the only correct way to retrieve all the necessary important information to this end. Copyright © 2018 The Canadian Society of Clinical Chemists. Published by Elsevier Inc. All rights reserved.

Gaps analysis for CD metrology beyond the 22nm node

NASA Astrophysics Data System (ADS)

Bunday, Benjamin; Germer, Thomas A.; Vartanian, Victor; Cordes, Aaron; Cepler, Aron; Settens, Charles

2013-04-01

This paper will examine the future for critical dimension (CD) metrology. First, we will present the extensive list of applications for which CD metrology solutions are needed, showing commonalities and differences among the various applications. We will then report on the expected technical limits of the metrology solutions currently being investigated by SEMATECH and others in the industry to address the metrology challenges of future nodes, including conventional CD scanning electron microscopy (CD-SEM) and optical critical dimension (OCD) metrology and new potential solutions such as He-ion microscopy (HeIM, sometimes elsewhere referred to as HIM), CD atomic force microscopy (CD-AFM), CD small-angle x-ray scattering (CD-SAXS), high-voltage scanning electron microscopy (HV-SEM), and other types. A technical gap analysis matrix will then be demonstrated, showing the current state of understanding of the future of the CD metrology space.

NASA-JSC antenna near-field measurement system

NASA Technical Reports Server (NTRS)

Cooke, W. P.; Friederich, P. G.; Jenkins, B. M.; Jameson, C. R.; Estrada, J. P.

1988-01-01

Work was completed on the near-field range control software. The capabilities of the data processing software were expanded with the addition of probe compensation. In addition, the user can process the measured data from the same computer terminal used for range control. The design of the laser metrology system was completed. It provides precise measruement of probe location during near-field measurements as well as position data for control of the translation beam and probe cart. A near-field range measurement system was designed, fabricated, and tested.

Learning Reverse Engineering and Simulation with Design Visualization

NASA Technical Reports Server (NTRS)

Hemsworth, Paul J.

2018-01-01

The Design Visualization (DV) group supports work at the Kennedy Space Center by utilizing metrology data with Computer-Aided Design (CAD) models and simulations to provide accurate visual representations that aid in decision-making. The capability to measure and simulate objects in real time helps to predict and avoid potential problems before they become expensive in addition to facilitating the planning of operations. I had the opportunity to work on existing and new models and simulations in support of DV and NASA’s Exploration Ground Systems (EGS).

Optical metrology for testing an all-composite 2-meter diameter mirror

NASA Technical Reports Server (NTRS)

Catanzaro, B.; Thomas, James A.; Small, D.; Johnston, R.; Barber, D.; Connell, S.; Whitmore, S.; Cohen, E.

2001-01-01

The Herschel Space Observatory (formerly known as FIRST) consists of a 3.5 m space telescope designed for use in the long IR and sub-milimeter wavebands. To demonstrate the viability of a carbon fiber composite telescope for this application, Composite Optics Incorporated (COI) manufactured a fast (f/1), large (2 m), lightweight (10.1 kg/m squared) demonstration mirror. A key challenge in demonstrating the performance of this novel mirror was to characterize the surface accuracy at cryogenic (70 K) temperatures. A wide variety of optical metrology techniques were investigated and a brief survey of empirical test results and limitations of the various techniques will be presented in this paper. Two complementary infrared (IR)techniques operating at a wavelength of 10.6 microns were chosen for further development: (1) IR Twyman-Green Phase Shifting Interferometry (IR PSI) and (2) IR Shack-Hartmann (IR SH) Wavefront Sensing. Innovative design modifications made to an existing IR PSI to achieve high-resolution, scannable, infrared measurements of the composite mirror are described. The modified interferometer was capable of measuring surface gradients larger than 350 microradians. The design and results of measurements made with a custom-built IR SH Wavefrong Sensor operating at 10.6 microns are also presented. A compact experimental setup permitting simultaneous operation of both the IR PSI and IR SH tools is shown. The advantages and the limitations of the two key IR metrology tools are discussed.

Miniaturized diffraction based interferometric distance measurement sensor

NASA Astrophysics Data System (ADS)

Kim, Byungki

In this thesis, new metrology hardware is designed, fabricated, and tested to provide improvements over current MEMS metrology. The metrology system is a micromachined scanning interferometer (muSI) having a sub-nm resolution in a compact design. The proposed microinterferometer forms a phase sensitive diffraction grating with interferomeric sensitivity, while adding the capability of better lateral resolution by focusing the laser to a smaller spot size. A detailed diffraction model of the microinterferometer was developed to simulate the device performance and to suggest the location of photo detectors for integrated optoelectronics. A particular device is fabricated on a fused silica substrate using aluminum to form the deformable diffraction grating fingers and AZ P4620 photo resist (PR) for the microlens. The details of the fabrication processes are presented. The structure also enables optoelectronics to be integrated so that the interferometer with photo detectors can fit in an area that is 1 mm x 1 mm. The scanning results using a fixed grating muSI demonstrated that it could measure vibration profile as well as static vertical (less than a half wave length) and lateral dimension of MEMS. The muSI, which is integrated with photo diodes, demonstrated its operation by scanning a cMUT. The PID control has been tested and resulted in improvement in scanned images. The integrated muSI demonstrated that the deformable grating could be used to tune the measurement keep the interferometer in quadrature for highest sensitivity.

Sub-microradian Surface Slope Metrology with the ALS Developmental Long Trace Profiler

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yashchuk, Valeriy V.; Barber, Samuel; Domning, Edward E.

2009-06-15

Development of X-ray optics for 3rd and 4th generation X-ray light sources with a level of surface slope precision of 0.1-0.2 {micro}rad requires the development of adequate fabrication technologies and dedicated metrology instrumentation and methods. Currently, the best performance of surface slope measurement has been achieved with the NOM (Nanometer Optical Component Measuring Machine) slope profiler at BESSY (Germany) [1] and the ESAD (Extended Shear Angle Difference) profiler at the PTB (Germany) [2]. Both instruments are based on electronic autocollimators (AC) precisely calibrated for the specific application [3] with small apertures of 2.5-5 mm in diameter. In the present work,more » we describe the design, initial alignment and calibration procedures, the instrumental control and data acquisition system, as well as the measurement performance of the Developmental Long Trace Profiler (DLTP) slope measuring instrument recently brought into operation at the Advanced Light Source (ALS) Optical Metrology Laboratory (OML). Similar to the NOM and ESAD, the DLTP is based on a precisely calibrated autocollimator. However, this is a reasonably low budget instrument used at the ALS OML for the development and testing of new measuring techniques and methods. Some of the developed methods have been implemented into the ALS LTP-II (slope measuring long trace profiler [4]) which was recently upgraded and has demonstrated a capability for 0.25 {micro}rad surface metrology [5]. Performance of the DLTP was verified via a number of measurements with high quality reference mirrors. A comparison with the corresponding results obtained with the world's best slope measuring instrument, the BESSY NOM, proves the accuracy of the DLTP measurements on the level of 0.1-0.2 {micro}rad depending on the curvature of a surface under test. The directions of future work to develop a surface slope measuring profiler with nano-radian performance are also discussed.« less

Experimental Demonstration of Higher Precision Weak-Value-Based Metrology Using Power Recycling

NASA Astrophysics Data System (ADS)

Wang, Yi-Tao; Tang, Jian-Shun; Hu, Gang; Wang, Jian; Yu, Shang; Zhou, Zong-Quan; Cheng, Ze-Di; Xu, Jin-Shi; Fang, Sen-Zhi; Wu, Qing-Lin; Li, Chuan-Feng; Guo, Guang-Can

2016-12-01

The weak-value-based metrology is very promising and has attracted a lot of attention in recent years because of its remarkable ability in signal amplification. However, it is suggested that the upper limit of the precision of this metrology cannot exceed that of classical metrology because of the low sample size caused by the probe loss during postselection. Nevertheless, a recent proposal shows that this probe loss can be reduced by the power-recycling technique, and thus enhance the precision of weak-value-based metrology. Here we experimentally realize the power-recycled interferometric weak-value-based beam-deflection measurement and obtain the amplitude of the detected signal and white noise by discrete Fourier transform. Our results show that the detected signal can be strengthened by power recycling, and the power-recycled weak-value-based signal-to-noise ratio can surpass the upper limit of the classical scheme, corresponding to the shot-noise limit. This work sheds light on higher precision metrology and explores the real advantage of the weak-value-based metrology over classical metrology.

Breed traceability of buffalo meat using microsatellite genotyping technique.

PubMed

Kannur, Bheemashankar H; Fairoze, Md Nadeem; Girish, P S; Karabasanavar, Nagappa; Rudresh, B H

2017-02-01

Although buffalo has emerged as a major meat producing animal in Asia, major research on breed traceability has so far been focused on cattle (beef). This research gap on buffalo breed traceability has impelled development and validation of buffalo breed traceability using a set of eight microsatellite (STR) markers in seven Indian buffalo breeds (Bhadawari, Jaffaarabadi, Murrah, Mehsana, Nagpuri, Pandharpuri and Surti). Probability of sharing same profile by two individuals at a specific locus was computed considering different STR numbers, allele pooling in breed and population. Match probabilities per breed were considered and six most polymorphic loci were genotyped. Out of eight microsatellite markers studied, markers CSSMO47, DRB3 and CSSM060 were found most polymorphic. Developed technique was validated with known and unknown, blood and meat samples; wherein, samples were genetically traced in 24 out of 25 samples tested. Results of this study showed potential applications of the methodology and encourage other researchers to address the problem of buffalo traceability so as to create a world-wide archive of breed specific genotypes. This work is the first report of breed traceability of buffalo meat utilizing microsatellite genotyping technique.

Development of an angle-scanning spectropolarimeter: Preliminary results

NASA Astrophysics Data System (ADS)

Nouri, Sahar A.; Gregory, Don A.; Fuller, Kirk

2018-02-01

A fixed-angle spectropolarimeter capable of measuring the Mueller matrix of particle deposits and conventional optical elements over the 300-1100 nm spectral range has been built, calibrated and extensively tested. A second generation of this instrument is being built which can scan from 0° to near 180° in both scattering angle and sample orientation, enabling studies of the bidirectional Mueller matrices of nanoparticle arrays, atmospheric aerosol deposits, and nano- and microstructured surfaces. This system will also provide a much needed metrology capability for fully characterizing the performance of optical devices and device components from the near-infrared through the medium wave ultraviolet. Experimental results taken using the first generation fixed-angle arrangement will be presented along with the rationale for building the second.

The Filled Arm Fizeau Telescope (FFT)

NASA Technical Reports Server (NTRS)

Synnott, S. P.

1991-01-01

Attention is given to the design of a Mills Cross imaging interferometer in which the arms are fully filled with mirror segments of a Ritchey-Chretien primary and which has sensitivity to 27th magnitude per pixel and resolution a factor of 10 greater than Hubble. The optical design, structural configuration, thermal disturbances, and vibration, material, control, and metrology issues, as well as scientific capabilities are discussed, and technology needs are identified. The technologies under consideration are similar to those required for the development of the other imaging interferometers that have been proposed over the past decade. A comparison of the imaging capabilities of a 30-m diameter FFT, an 8-m telescope with a collecting area equal to that of the FFT, and the HST is presented.

Current Barriers to Large-scale Interoperability of Traceability Technology in the Seafood Sector.

PubMed

Hardt, Marah J; Flett, Keith; Howell, Colleen J

2017-08-01

Interoperability is a critical component of full-chain digital traceability, but is almost nonexistent in the seafood industry. Using both quantitative and qualitative methodology, this study explores the barriers impeding progress toward large-scale interoperability among digital traceability systems in the seafood sector from the perspectives of seafood companies, technology vendors, and supply chains as a whole. We highlight lessons from recent research and field work focused on implementing traceability across full supply chains and make some recommendations for next steps in terms of overcoming challenges and scaling current efforts. © 2017 Institute of Food Technologists®.

Reduction of wafer-edge overlay errors using advanced correction models, optimized for minimal metrology requirements

NASA Astrophysics Data System (ADS)

Kim, Min-Suk; Won, Hwa-Yeon; Jeong, Jong-Mun; Böcker, Paul; Vergaij-Huizer, Lydia; Kupers, Michiel; Jovanović, Milenko; Sochal, Inez; Ryan, Kevin; Sun, Kyu-Tae; Lim, Young-Wan; Byun, Jin-Moo; Kim, Gwang-Gon; Suh, Jung-Joon

2016-03-01

In order to optimize yield in DRAM semiconductor manufacturing for 2x nodes and beyond, the (processing induced) overlay fingerprint towards the edge of the wafer needs to be reduced. Traditionally, this is achieved by acquiring denser overlay metrology at the edge of the wafer, to feed field-by-field corrections. Although field-by-field corrections can be effective in reducing localized overlay errors, the requirement for dense metrology to determine the corrections can become a limiting factor due to a significant increase of metrology time and cost. In this study, a more cost-effective solution has been found in extending the regular correction model with an edge-specific component. This new overlay correction model can be driven by an optimized, sparser sampling especially at the wafer edge area, and also allows for a reduction of noise propagation. Lithography correction potential has been maximized, with significantly less metrology needs. Evaluations have been performed, demonstrating the benefit of edge models in terms of on-product overlay performance, as well as cell based overlay performance based on metrology-to-cell matching improvements. Performance can be increased compared to POR modeling and sampling, which can contribute to (overlay based) yield improvement. Based on advanced modeling including edge components, metrology requirements have been optimized, enabling integrated metrology which drives down overall metrology fab footprint and lithography cycle time.

[Establishment of traceability system of Chinese medicinal materials' quality].

PubMed

Qi, Yao-dong; Gao, Shi-man; Liu, Hai-tao; Li, Xi-wen; Wei, Jian-he; Zhang, Ben-gang; Sun, Xiao-bo; Xiao, Pei-gen

2015-12-01

The quality of Chinese medicinal materials relates greatly to the clinical curative effect and security. In order to ensure the quality and safety of Chinese medicinal materials, a systematic and operable traceability system needs to be established. It can realize the whole process of quality and safety management of Chinese medicinal materials "from production to consumption" through recording and inquiring information and recalling defective products, which is an important direction for the future development of traditional Chinese medicine. But it is still at the exploration and trial stage. In this paper, a framework of Chinese medicinal materials' quality and safety traceability system was established on the basis of the domestic and international experience about the construction of food and agricultural products traceability systems. The relationship between traceability system of Chinese medicinal materials' quality and GAP, GMP, GSP was analyzed, and the possible problems and the corresponding solutions were discussed.

Toward fish and seafood traceability: anchovy species determination in fish products by molecular markers and support through a public domain database.

PubMed

Jérôme, Marc; Martinsohn, Jann Thorsten; Ortega, Delphine; Carreau, Philippe; Verrez-Bagnis, Véronique; Mouchel, Olivier

2008-05-28

Traceability in the fish food sector plays an increasingly important role for consumer protection and confidence building. This is reflected by the introduction of legislation and rules covering traceability on national and international levels. Although traceability through labeling is well established and supported by respective regulations, monitoring and enforcement of these rules are still hampered by the lack of efficient diagnostic tools. We describe protocols using a direct sequencing method based on 212-274-bp diagnostic sequences derived from species-specific mitochondria DNA cytochrome b, 16S rRNA, and cytochrome oxidase subunit I sequences which can efficiently be applied to unambiguously determine even closely related fish species in processed food products labeled "anchovy". Traceability of anchovy-labeled products is supported by the public online database AnchovyID ( http://anchovyid.jrc.ec.europa.eu), which provided data obtained during our study and tools for analytical purposes.

Value-Based Requirements Traceability: Lessons Learned

NASA Astrophysics Data System (ADS)

Egyed, Alexander; Grünbacher, Paul; Heindl, Matthias; Biffl, Stefan

Traceability from requirements to code is mandated by numerous software development standards. These standards, however, are not explicit about the appropriate level of quality of trace links. From a technical perspective, trace quality should meet the needs of the intended trace utilizations. Unfortunately, long-term trace utilizations are typically unknown at the time of trace acquisition which represents a dilemma for many companies. This chapter suggests ways to balance the cost and benefits of requirements traceability. We present data from three case studies demonstrating that trace acquisition requires broad coverage but can tolerate imprecision. With this trade-off our lessons learned suggest a traceability strategy that (1) provides trace links more quickly, (2) refines trace links according to user-defined value considerations, and (3) supports the later refinement of trace links in case the initial value consideration has changed over time. The scope of our work considers the entire life cycle of traceability instead of just the creation of trace links.

RELAP-7 Code Assessment Plan and Requirement Traceability Matrix

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yoo, Junsoo; Choi, Yong-joon; Smith, Curtis L.

2016-10-01

The RELAP-7, a safety analysis code for nuclear reactor system, is under development at Idaho National Laboratory (INL). Overall, the code development is directed towards leveraging the advancements in computer science technology, numerical solution methods and physical models over the last decades. Recently, INL has also been putting an effort to establish the code assessment plan, which aims to ensure an improved final product quality through the RELAP-7 development process. The ultimate goal of this plan is to propose a suitable way to systematically assess the wide range of software requirements for RELAP-7, including the software design, user interface, andmore » technical requirements, etc. To this end, we first survey the literature (i.e., international/domestic reports, research articles) addressing the desirable features generally required for advanced nuclear system safety analysis codes. In addition, the V&V (verification and validation) efforts as well as the legacy issues of several recently-developed codes (e.g., RELAP5-3D, TRACE V5.0) are investigated. Lastly, this paper outlines the Requirement Traceability Matrix (RTM) for RELAP-7 which can be used to systematically evaluate and identify the code development process and its present capability.« less

Optical surface analysis: a new technique for the inspection and metrology of optoelectronic films and wafers

NASA Astrophysics Data System (ADS)

Bechtler, Laurie; Velidandla, Vamsi

2003-04-01

In response to demand for higher volumes and greater product capability, integrated optoelectronic device processing is rapidly increasing in complexity, benefiting from techniques developed for conventional silicon integrated circuit processing. The needs for high product yield and low manufacturing cost are also similar to the silicon wafer processing industry. This paper discusses the design and use of an automated inspection instrument called the Optical Surface Analyzer (OSA) to evaluate two critical production issues in optoelectronic device manufacturing: (1) film thickness uniformity, and (2) defectivity at various process steps. The OSA measurement instrument is better suited to photonics process development than most equipment developed for conventional silicon wafer processing in two important ways: it can handle both transparent and opaque substrates (unlike most inspection and metrology tools), and it is a full-wafer inspection method that captures defects and film variations over the entire substrate surface (unlike most film thickness measurement tools). Measurement examples will be provided in the paper for a variety of films and substrates used for optoelectronics manufacturing.

Test benches for studying the properties of car tyres

NASA Astrophysics Data System (ADS)

Kuznetsov, N. Yu.; Fedotov, A. I.; Vlasov, V. G.

2017-12-01

The article describes the design of the measuring systems of test benches used to study the properties of elastic tyres. The bench has two autonomous systems - for testing the braking properties of elastic tyres rolling in a plane parallel way and for testing tyre slip properties. The system for testing braking properties determines experimental characteristics of elastic tyres as the following dependencies: longitudinal response vs time, braking torque vs slip, angular velocity vs slip, and longitudinal response vs slip. The system for studying tyre slip properties determines both steady (dependence of the lateral response in a contact area on the slipping angle) and non-steady characteristics (time variation of the slipping angle as a result of turning from -40 to +40 degrees) of tyre slip. The article presents the diagrams of bench tests of elastic tyres. The experimental results show metrological parameters and functional capabilities of the bench for studying tyre properties in driving and braking modes. The metrological indices of the recorded parameters of the measuring system for studying tyre properties are presented in the table.

Spectral purity and tunability of terahertz quantum cascade laser sources based on intracavity difference-frequency generation.

PubMed

Consolino, Luigi; Jung, Seungyong; Campa, Annamaria; De Regis, Michele; Pal, Shovon; Kim, Jae Hyun; Fujita, Kazuue; Ito, Akio; Hitaka, Masahiro; Bartalini, Saverio; De Natale, Paolo; Belkin, Mikhail A; Vitiello, Miriam Serena

2017-09-01

Terahertz sources based on intracavity difference-frequency generation in mid-infrared quantum cascade lasers (THz DFG-QCLs) have recently emerged as the first monolithic electrically pumped semiconductor sources capable of operating at room temperature across the 1- to 6-THz range. Despite tremendous progress in power output, which now exceeds 1 mW in pulsed and 10 μW in continuous-wave regimes at room temperature, knowledge of the major figure of merits of these devices for high-precision spectroscopy, such as spectral purity and absolute frequency tunability, is still lacking. By exploiting a metrological grade system comprising a terahertz frequency comb synthesizer, we measure, for the first time, the free-running emission linewidth (LW), the tuning characteristics, and the absolute center frequency of individual emission lines of these sources with an uncertainty of 4 × 10 -10 . The unveiled emission LW (400 kHz at 1-ms integration time) indicates that DFG-QCLs are well suited to operate as local oscillators and to be used for a variety of metrological, spectroscopic, communication, and imaging applications that require narrow-LW THz sources.

Design considerations and validation of the MSTAR absolute metrology system

NASA Astrophysics Data System (ADS)

Peters, Robert D.; Lay, Oliver P.; Dubovitsky, Serge; Burger, Johan; Jeganathan, Muthu

2004-08-01

Absolute metrology measures the actual distance between two optical fiducials. A number of methods have been employed, including pulsed time-of-flight, intensity-modulated optical beam, and two-color interferometry. The rms accuracy is currently limited to ~5 microns. Resolving the integer number of wavelengths requires a 1-sigma range accuracy of ~0.1 microns. Closing this gap has a large pay-off: the range (length measurement) accuracy can be increased substantially using the unambiguous optical phase. The MSTAR sensor (Modulation Sideband Technology for Absolute Ranging) is a new system for measuring absolute distance, capable of resolving the integer cycle ambiguity of standard interferometers, and making it possible to measure distance with sub-nanometer accuracy. In this paper, we present recent experiments that use dispersed white light interferometry to independently validate the zero-point of the system. We also describe progress towards reducing the size of optics, and stabilizing the laser wavelength for operation over larger target ranges. MSTAR is a general-purpose tool for conveniently measuring length with much greater accuracy than was previously possible, and has a wide range of possible applications.

Oscillator metrology with software defined radio.

PubMed

Sherman, Jeff A; Jördens, Robert

2016-05-01

Analog electrical elements such as mixers, filters, transfer oscillators, isolating buffers, dividers, and even transmission lines contribute technical noise and unwanted environmental coupling in time and frequency measurements. Software defined radio (SDR) techniques replace many of these analog components with digital signal processing (DSP) on rapidly sampled signals. We demonstrate that, generically, commercially available multi-channel SDRs are capable of time and frequency metrology, outperforming purpose-built devices by as much as an order-of-magnitude. For example, for signals at 10 MHz and 6 GHz, we observe SDR time deviation noise floors of about 20 fs and 1 fs, respectively, in under 10 ms of averaging. Examining the other complex signal component, we find a relative amplitude measurement instability of 3 × 10(-7) at 5 MHz. We discuss the scalability of a SDR-based system for simultaneous measurement of many clocks. SDR's frequency agility allows for comparison of oscillators at widely different frequencies. We demonstrate a novel and extreme example with optical clock frequencies differing by many terahertz: using a femtosecond-laser frequency comb and SDR, we show femtosecond-level time comparisons of ultra-stable lasers with zero measurement dead-time.

Quantitative Secondary Electron Detector (QSED)

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nayak, Subu; Joy, David C.

2013-12-31

Research is proposed to investigate the feasibility of applying recent advances in semiconductor technology to fabricate direct digital Quantitative Secondary Electron Detectors (QSED) for scanning electron microscopes (SEMs). If successful, commercial versions of the QSED would transform the SEM into a quantitative, metrological system with enhanced capabilities that, in turn, would broaden research horizons across industries. This project will be conducted in collaboration with Dr. David C Joy at the University of Tennessee, who has demonstrated limited (to the 1keV range) digital collection of the energy from backscattered signals in a SEM using a modified silicon drift detector. Several detectormore » configurations will be fabricated and tested for sensitivities, background noise reduction, DC offset elimination, and metrological capabilities (linearity, accuracy, etc.) against a set of commercially important performance criteria to ascertain concept feasibility. Once feasibility is proven, the solid state digital device array and its switching frequency will be scaled-up, in Phase II, to improve temporal resolution. If successful, this work will produce a crucial advancement in electron microscopy with wide-ranging applications. The following are key advantages anticipated from direct digital QSED: 1. High signal-to-noise ratio will improve SEM resolution in nano-scale, which is critical for dimensional metrology in any application. 2. Quantitative measurement will enhance process control and design validation in semiconductors, photo-voltaics, bio-medical devices and catalysts; and will improve accuracy in predicting the reliability and the lifecycle of materials across industries. 3. Video and dynamic-imaging capabilities will advance study in nano-scale phenomena in a variety of industries, including pharmaceutical and semiconductor materials. 4. Lower cost will make high-performing electron microscopes affordable to more researchers. 5. Compact size and ease of integration with imaging software will enable customers to retrofit and upgrade existing SEM equipment. ScienceTomorrow’s direct digital QSED concept has generated enthusiastic interest among a number of microscope makers, service companies, and microscope users. The company has offers of support from several companies. The roles these companies would play in supporting the project are described in the proposal. The proposed QSED advance sits squarely in the middle of ScienceTomorrow’s mission to provide next-generation technology solutions to today’s critical problems and, if successful, will further the company’s business strategy by launching an advanced, high-margin product that will enable the company and its partners to create at least 17 net-new jobs by the end of 2018.« less

Overlay accuracy fundamentals

NASA Astrophysics Data System (ADS)

Kandel, Daniel; Levinski, Vladimir; Sapiens, Noam; Cohen, Guy; Amit, Eran; Klein, Dana; Vakshtein, Irina

2012-03-01

Currently, the performance of overlay metrology is evaluated mainly based on random error contributions such as precision and TIS variability. With the expected shrinkage of the overlay metrology budget to < 0.5nm, it becomes crucial to include also systematic error contributions which affect the accuracy of the metrology. Here we discuss fundamental aspects of overlay accuracy and a methodology to improve accuracy significantly. We identify overlay mark imperfections and their interaction with the metrology technology, as the main source of overlay inaccuracy. The most important type of mark imperfection is mark asymmetry. Overlay mark asymmetry leads to a geometrical ambiguity in the definition of overlay, which can be ~1nm or less. It is shown theoretically and in simulations that the metrology may enhance the effect of overlay mark asymmetry significantly and lead to metrology inaccuracy ~10nm, much larger than the geometrical ambiguity. The analysis is carried out for two different overlay metrology technologies: Imaging overlay and DBO (1st order diffraction based overlay). It is demonstrated that the sensitivity of DBO to overlay mark asymmetry is larger than the sensitivity of imaging overlay. Finally, we show that a recently developed measurement quality metric serves as a valuable tool for improving overlay metrology accuracy. Simulation results demonstrate that the accuracy of imaging overlay can be improved significantly by recipe setup optimized using the quality metric. We conclude that imaging overlay metrology, complemented by appropriate use of measurement quality metric, results in optimal overlay accuracy.

CCQM-K140: carbon stable isotope ratio delta values in honey

NASA Astrophysics Data System (ADS)

Dunn, P. J. H.; Goenaga-Infante, H.; Goren, A. C.; Şimşek, A.; Bilsel, M.; Ogrinc, N.; Armishaw, P.; Hai, L.

2017-01-01

As there can be small but measureable differences in isotope ratios between different sources of the same element/compound/material, isotope ratio measurements are applied in a number of different fields including archaeology, environmental science, geochemistry, forensic science and ecology. Isotope ratios for the light elements (H, C, N, O and S) are typically reported as δ-values which are isotope ratios expressed relative to an internationally agreed standard (this standard is the zero-point on the scale), although absolute isotope ratios which are traceable to the SI have also been reported. The IAWG has been granted a traceability exception for the use of arbitrary delta scales until SI traceability can be established at the required level of uncertainty but this goal is some years away. While the CCQM IAWG has previously organised several pilot studies on isotope ratio determination (CCQM-P75: Stable isotope delta values in methionine, 2006; CCQM-P105: Sr isotope ratios in wine, 2008; CCQM-K98: Pb isotope ratios in bronze with additional delta values in CCQM-P134, 2011), it has been a number of years since delta values of light elements have been considered and there has been no key comparison (KC). Therefore, the IAWG has included the need for a KC (CCQM-K140) based on an arbitrary delta scale in its program to support ongoing requirements to demonstrate core capabilities as well as specific claims of measurement capability (CMCs) in this area. The performance of all five of the CCQM-K140 participants was very good, illustrating their ability to obtain accurate results for carbon isotope ratios, within the calibration range afforded by internationally agreed reference materials (δ13CVPDB-LSVEC between -47.32 % and +535.3 %) with measurement uncertainties of between 0.08 and 0.28 %. This was despite the fact that no two participants used exactly the same approach in terms of instrumentation or data treatment. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCQM, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

Simulation and Measurement of Absorbed Dose from 137 Cs Gammas Using a Si Timepix Detector

NASA Technical Reports Server (NTRS)

Stoffle, Nicholas; Pinsky, Lawrence; Empl, Anton; Semones, Edward

2011-01-01

The TimePix readout chip is a hybrid pixel detector with over 65k independent pixel elements. Each pixel contains its own circuitry for charge collection, counting logic, and readout. When coupled with a Silicon detector layer, the Timepix chip is capable of measuring the charge, and thus energy, deposited in the Silicon. Measurements using a NIST traceable 137Cs gamma source have been made at Johnson Space Center using such a Si Timepix detector, and this data is compared to simulations of energy deposition in the Si layer carried out using FLUKA.

Grazing Incidence Optics Technology

NASA Technical Reports Server (NTRS)

Ramsey, Brian; Smith, W. Scott; Gubarev, Mikhail; McCracken, Jeff

2015-01-01

This project is to demonstrate the capability to directly fabricate lightweight, high-resolution, grazing-incidence x-ray optics using a commercially available robotic polishing machine. Typical x-ray optics production at NASA Marshall Space Flight Center (MSFC) uses a replication process in which metal mirrors are electroformed on to figured and polished mandrels from which they are later removed. The attraction of this process is that multiple copies can be made from a single master. The drawback is that the replication process limits the angular resolution that can be attained. By directly fabricating each shell, errors inherent in the replication process are removed. The principal challenge now becomes how to support the mirror shell during all aspects of fabrication, including the necessary metrology to converge on the required mirror performance specifications. This program makes use of a Zeeko seven-axis computer-controlled polishing machine (see fig. 1) and supporting fabrication, metrology, and test equipment at MSFC. The overall development plan calls for proof-of-concept demonstration with relatively thick mirror shells (5-6 mm, fig. 2) which are straightforward to support and then a transition to much thinner shells (2-3 mm), which are an order of magnitude thinner than those used for Chandra. Both glass and metal substrates are being investigated. Currently, a thick glass shell is being figured. This has enabled experience to be gained with programming and operating the polishing machine without worrying about shell distortions or breakage. It has also allowed time for more complex support mechanisms for figuring/ polishing and metrology to be designed for the more challenging thinner shells. These are now in fabrication. Figure 1: Zeeko polishing machine.

Final report of CCAUV.V-K3: key comparison in the field of acceleration on the complex charge sensitivity

NASA Astrophysics Data System (ADS)

Qiao, Sun; Lifeng, Yang; Bartoli, Claire; Veldman, Ian; Ripper, Gustavo P.; Bruns, Thomas; Rask Licht, Torben; Kolasa, Joanna; Hof, Christian; Silva Pineda, Guillermo; Dickinson, Laurence; Ota, Akihiro; Cheung, Wan Sup; Yankovsky, Alexander; Shan, Cui

2017-01-01

This is the final report for CIPM key comparison CCAUV.V-K3 in the area of 'vibration' (quantity of acceleration). The aim of this comparison was to measure the voltage sensitivity of one accelerometer standard set with primary means at 27 frequencies from 0.1 Hz to 40 Hz. Fourteen Metrology Institutes from five RMOs have participated in the comparison with National Institute of Metrology, P.R. China as pilot lab and Laboratoire National de Métrologie et d'Essais and National Metrology Institute of South Africa as co-pilot labs. One quartz-flexure servo accelerometer of single-ended type and a signal conditioner was circulated among the participants. All but one of the participating laboratories provided their calibration results, which were mostly consistent within their declared expanded uncertainties for magnitude results. Only two participants failed to contribute to the KCRV values calculated for five frequencies. For phase shift, three participants could not contribute to the calculation of the KCRV values in a total of sixteen frequencies. This first low-frequency vibration key comparison revealed the current calibration capabilities of the fourteen participants of five RMOs. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCAUV, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA).

Evaluation of a new photomask CD metrology tool

NASA Astrophysics Data System (ADS)

Dubuque, Leonard F.; Doe, Nicholas G.; St. Cin, Patrick

1996-12-01

In the integrated circuit (IC) photomask industry today, dense IC patterns, sub-micron critical dimensions (CD), and narrow tolerances for 64 M technologies and beyond are driving increased demands to minimize and characterize all components of photomask CD variation. This places strict requirements on photomask CD metrology in order to accurately characterize the mask CD error distribution. According to the gauge-maker's rule, measurement error must not exceed 30% of the tolerance on the product dimension measured or the gauge is not considered capable. The traditional single point repeatability tests are a poor measure of overall measurement system error in a dynamic, leading-edge technology environment. In such an environment, measurements may be taken at different points in the field- of-view due to stage in-accuracy, pattern recognition requirements, and throughput considerations. With this in mind, a set of experiments were designed to characterize thoroughly the metrology tool's repeatability and systematic error. Original experiments provided inconclusive results and had to be extended to obtain a full characterization of the system. Tests demonstrated a performance of better than 15 nm total CD error. Using this test as a tool for further development, the authors were able to determine the effects of various system components and measure the improvement with changes in optics, electronics, and software. Optimization of the optical path, electronics, and system software has yielded a new instrument with a total system error of better than 8 nm. Good collaboration between the photomask manufacturer and the equipment supplier has led to a realistic test of system performance and an improved CD measurement instrument.

Metrological Support in Technosphere Safety

NASA Astrophysics Data System (ADS)

Akhobadze, G. N.

2017-11-01

The principle of metrological support in technosphere safety is considered. It is based on the practical metrology. The theoretical aspects of accuracy and errors of the measuring instruments intended for diagnostics and control of the technosphere under the influence of factors harmful to human beings are presented. The necessity to choose measuring devices with high metrological characteristics according to the accuracy class and contact of sensitive elements with a medium under control is shown. The types of additional errors in measuring instruments that arise when they are affected by environmental influences are described. A specific example of the analyzers application to control industrial emissions and measure the oil and particulate matter in wastewater is shown; it allows assessing advantages and disadvantages of analyzers. Besides, the recommendations regarding the missing metrological characteristics of the instruments in use are provided. The technosphere continuous monitoring taking into account the metrological principles is expected to efficiently forecast the technosphere development and make appropriate decisions.

Entanglement-enhanced quantum metrology in a noisy environment

NASA Astrophysics Data System (ADS)

Wang, Kunkun; Wang, Xiaoping; Zhan, Xiang; Bian, Zhihao; Li, Jian; Sanders, Barry C.; Xue, Peng

2018-04-01

Quantum metrology overcomes standard precision limits and plays a central role in science and technology. Practically, it is vulnerable to imperfections such as decoherence. Here we demonstrate quantum metrology for noisy channels such that entanglement with ancillary qubits enhances the quantum Fisher information for phase estimation but not otherwise. Our photonic experiment covers a range of noise for various types of channels, including for two randomly alternating channels such that assisted entanglement fails for each noisy channel individually. We simulate noisy channels by implementing space-multiplexed dual interferometers with quantum photonic inputs. We demonstrate the advantage of entanglement-assisted protocols in a phase estimation experiment run with either a single-probe or multiprobe approach. These results establish that entanglement with ancillae is a valuable approach for delivering quantum-enhanced metrology. Our approach to entanglement-assisted quantum metrology via a simple linear-optical interferometric network with easy-to-prepare photonic inputs provides a path towards practical quantum metrology.

The Underwater Spectrometric System Based on CZT Detector for Survey of the Bottom of MR Reactor Pool - 13461

DOE Office of Scientific and Technical Information (OSTI.GOV)

Potapov, Victor; Safronov, Alexey; Ivanov, Oleg

2013-07-01

The underwater spectrometer system for detection of irradiated nuclear fuel on the pool bottom of the reactor was elaborated. During the development process metrological studies of CdZnTe (CZT) detectors were conducted. These detectors are designed for spectrometric measurements in high radiation fields. A mathematical model based on the Monte Carlo method was created to evaluate the capability of such a system. A few experimental models were realized and the characteristics of the spectrometric system are represented. (authors)

Forward scattering in two-beam laser interferometry

NASA Astrophysics Data System (ADS)

Mana, G.; Massa, E.; Sasso, C. P.

2018-04-01

A fractional error as large as 25 pm mm-1 at the zero optical-path difference has been observed in an optical interferometer measuring the displacement of an x-ray interferometer used to determine the lattice parameter of silicon. Detailed investigations have brought to light that the error was caused by light forward-scattered from the beam feeding the interferometer. This paper reports on the impact of forward-scattered light on the accuracy of two-beam optical interferometry applied to length metrology, and supplies a model capable of explaining the observed error.

Controlling Wafer Contamination Using Automated On-Line Metrology during Wet Chemical Cleaning

NASA Astrophysics Data System (ADS)

Wang, Jason; Kingston, Skip; Han, Ye; Saini, Harmesh; McDonald, Robert; Mui, Rudy

2003-09-01

The capabilities of a trace contamination analyzer are discussed and demonstrated. This analytical tool utilizes an electrospray, time-of-flight mass spectrometer (ES-TOF-MS) for fully automated on-line monitoring of wafer cleaning solutions. The analyzer provides rich information on metallic, anionic, cationic, elemental, and organic species through its ability to provide harsh (elemental) and soft (molecular) ionization under both positive and negative modes. It is designed to meet semiconductor process control and yield management needs for the ever increasing complex new chemistries present in wafer fabrication.

Absolute Distance Measurement with the MSTAR Sensor

NASA Technical Reports Server (NTRS)

Lay, Oliver P.; Dubovitsky, Serge; Peters, Robert; Burger, Johan; Ahn, Seh-Won; Steier, William H.; Fetterman, Harrold R.; Chang, Yian

2003-01-01

The MSTAR sensor (Modulation Sideband Technology for Absolute Ranging) is a new system for measuring absolute distance, capable of resolving the integer cycle ambiguity of standard interferometers, and making it possible to measure distance with sub-nanometer accuracy. The sensor uses a single laser in conjunction with fast phase modulators and low frequency detectors. We describe the design of the system - the principle of operation, the metrology source, beamlaunching optics, and signal processing - and show results for target distances up to 1 meter. We then demonstrate how the system can be scaled to kilometer-scale distances.

Construction of Traceability System for Quality Safety of Cereal and Oil Products

NASA Astrophysics Data System (ADS)

Zheng, Huoguo; Liu, Shihong; Meng, Hong; Hu, Haiyan

After several significant food safety incident, global food industry and governments in many countries are putting increasing emphasis on establishment of food traceability systems. Food traceability has become an effective way in food quality and safety management. The traceability system for quality safety of cereal and oil products was designed and implemented with HACCP and FMECA method, encoding, information processing, and hardware R&D technology etc, according to the whole supply chain of cereal and oil products. Results indicated that the system provide not only the management in origin, processing, circulating and consuming for enterprise, but also tracing service for customers and supervisor by means of telephone, internet, SMS, touch machine and mobile terminal.

A Roadmap for Thermal Metrology

NASA Astrophysics Data System (ADS)

Bojkovski, J.; Fischer, J.; Machin, G.; Pavese, F.; Peruzzi, A.; Renaot, E.; Tegeler, E.

2009-02-01

A provisional roadmap for thermal metrology was developed in Spring 2006 as part of the EUROMET iMERA activity toward increasing impact from national investment in European metrology R&D. This consisted of two parts: one addressing the influence of thermal metrology on society, industry, and science, and the other specifying the requirements of enabling thermal metrology to serve future needs. The roadmap represents the shared vision of the EUROMET TC Therm committee as to how thermal metrology should develop to meet future requirements over the next 15 years. It is important to stress that these documents are a first attempt to roadmap the whole of thermal metrology and will certainly need regular review and revision to remain relevant and useful to the community they seek to serve. The first part of the roadmap, “Thermal metrology for society, industry, and science,” identifies the main social and economic triggers driving developments in thermal metrology—notably citizen safety and security, new production technologies, environment and global climate change, energy, and health. Stemming from these triggers, key targets are identified that require improved thermal measurements. The second part of the roadmap, “Enabling thermal metrology to serve future needs” identifies another set of triggers, like global trade and interoperability, future needs in transport, and the earth radiation budget. Stemming from these triggers, key targets are identified, such as improved realizations and dissemination of the SI unit the kelvin, anchoring the kelvin to the Boltzmann constant, k B, and calculating thermal properties from first principles. To facilitate these outcomes, the roadmap identifies the technical advances required in thermal measurement standards.

Relative range error evaluation of terrestrial laser scanners using a plate, a sphere, and a novel dual-sphere-plate target.

PubMed

Muralikrishnan, Bala; Rachakonda, Prem; Lee, Vincent; Shilling, Meghan; Sawyer, Daniel; Cheok, Geraldine; Cournoyer, Luc

2017-12-01

Terrestrial laser scanners (TLS) are a class of 3D imaging systems that produce a 3D point cloud by measuring the range and two angles to a point. The fundamental measurement of a TLS is range. Relative range error is one component of the overall range error of TLS and its estimation is therefore an important aspect in establishing metrological traceability of measurements performed using these systems. Target geometry is an important aspect to consider when realizing the relative range tests. The recently published ASTM E2938-15 mandates the use of a plate target for the relative range tests. While a plate target may reasonably be expected to produce distortion free data even at far distances, the target itself needs careful alignment at each of the relative range test positions. In this paper, we discuss relative range experiments performed using a plate target and then address the advantages and limitations of using a sphere target. We then present a novel dual-sphere-plate target that draws from the advantages of the sphere and the plate without the associated limitations. The spheres in the dual-sphere-plate target are used simply as fiducials to identify a point on the surface of the plate that is common to both the scanner and the reference instrument, thus overcoming the need to carefully align the target.

Nanomeasuring and nanopositioning engineering

NASA Astrophysics Data System (ADS)

Jäger, G.; Hausotte, T.; Manske, E.; Büchner, H.-J.; Mastylo, R.; Dorozhovets, N.; Hofmann, N.

2006-11-01

The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine) having a resolution of 0,1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universitaet Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany. The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

Cryogenics maintenance strategy

NASA Astrophysics Data System (ADS)

Cruzat, Fabiola

2012-09-01

ALMA is an interferometer composed of 66 independent systems, with specific maintenance requirements for each subsystem. To optimize the observation time and reduce downtime maintenance, requirements are very demanding. One subsystem with high maintenance efforts is cryogenics and vacuum. To organize the maintenance, the Cryogenic and Vacuum department is using and implementing different tools. These are monitoring and problem reporting systems and CMMS. This leads to different maintenance approaches: Preventive Maintenance, Corrective Maintenance and Condition Based Maintenance. In order to coordinate activities with other departments the preventive maintenance schedule is kept as flexible as systems allow. To cope with unavoidable failures, the team has to be prepared to work under any condition with the spares on time. Computerized maintenance management system (CMMS) will help to manage inventory control for reliable spare part handling, the correct record of work orders and traceability of maintenance activities. For an optimized approach the department is currently evaluating where preventive or condition based maintenance applies to comply with the individual system demand. Considering the change from maintenance contracts to in-house maintenance will help to minimize costs and increase availability of parts. Due to increased number of system and tasks the cryo team needs to grow. Training of all staff members is mandatory, in depth knowledge must be built up by doing complex maintenance activities in the Cryo group, use of advanced computerized metrology systems.

Comparative analysis for evaluating the traceability of interventional devices using blood vessel phantom models made of PVA-H or silicone.

PubMed

Yu, Chang-Ho; Kwon, Tae-Kyu; Park, Chan Hee; Ohta, Makoto; Kim, Sung Hoon

2015-01-01

In this paper, we investigated the parameters with effective traceability to assess the mechanical properties of interventional devices. In our evaluation system, a box-shaped poly (vinyl alcohol) hydrogel (PVA-H) and silicone were prepared with realistic geometry, and the measurement and evaluation of traceability were carried out on devices using load hand force. The phantom models had a total of five curve pathways to reach the aneurysm sac. Traceability depends on the performance of the interventional devices in order to pass through the curved part of the model simulation track. The traceability of the guide wire was found to be much better than that of the balloon and stent loading catheter, as it reached the aneurysm sac in both phantom models. Observation using the video record is another advantage of our system, because the high transparency of the materials with silicone and PVA-H can allow visualization of the inside of an artery.

A Traceable Ground to On-Orbit Radiometric Calibration System for the Solar Reflective Wavelength Region

NASA Technical Reports Server (NTRS)

Heath, Donald F.; Georgiev, Georgi

2012-01-01

This paper describes the combination of a Mie scattering spectral BSDF and BTDF albedo standard whose calibration is traceable to the NIST SIRCUS Facility or the NIST STARR II Facility. The Space-based Calibration Transfer Spectroradiometer (SCATS) sensor uses a simple, invariant optical configuration and dedicated narrow band spectral channel modules to provide very accurate, polarization-insensitive, stable measurements of earth albedo and lunar disk albedo. Optical degradation effects on calibration stability are eliminated through use of a common optical system for observations of the Sun, Earth, and Moon. The measurements from space would be traceable to SI units through preflight calibrations of radiance and irradiance at NIST's SIRCUS facility and the invariant optical system used in the sensor. Simultaneous measurements are made in multiple spectral channels covering the solar reflective wavelength range of 300 nm to 2.4 microns. The large dynamic range of signals is handled by use of single-element, highly-linear detectors, stable discrete electronic components, and a non imaging optical configuration. Up to 19 spectral modules can be mounted on a single-axis drive to give direct pointing at the Earth and at least once per orbit view of the Sun and Moon. By observing the Sun on every orbit, the most stringent stability requirements of the system are limited to short time periods. The invariant optical system for both radiance and irradiance measurements also give excellent transfer to-orbit SI traceability. Emerging instrumental requirements for remotely sensing tropospheric trace species have led to a rethinking by some of the paradigm for Systeme International d'Unites (SI) traceability of the spectral irradiance and radiance radiometric calibrations to spectral albedo (sr(exp -1)) which is not a SI unit. In the solar reflective wavelength region the spectral albedo calibrations are tied often to either the spectral albedo of a solar diffuser or the Moon. This new type of Mie scattering diffuser (MSD) is capable of withstanding high temperatures, and is more Lambertian than Spectralon(tm). It has the potential of covering the entire solar reflective wavelength region. Laboratory measurements have shown that the specular reflectance component is negligible, and indicate that internal absorption by multiple scattering is small. This MSD, a true volume diffuser, exhibits a high degree of radiometric stability which suggests that measurements at the National Institute of Standards and Technology (NIST) could provide a spectral albedo standard. Measurements have been made of its radiometric stability under a simulated space environment of high energy gamma rays, high energy protons, and UV radiation from ambient down to the vacuum ultraviolet H Lyman alpha at 121.6 nm for its eventual use in space as a solar diffuser.

Tracking Online Trails

NASA Astrophysics Data System (ADS)

Qi, Man; Edgar-Nevill, Denis; Wang, Yongquan; Xu, Rongsheng

Traceability is a key to the investigation of the internet criminal and a cornerstone of internet research. It is impossible to prevent all internet misuse but may be possible to identify and trace the users, and then take appropriate action. This paper presents the value of traceability within the email/-newsposting utilities, the technologies being using to hide identities, the difficulties in locating the traceable data and the challenges in tracking online trails.

Management traceability information system for the food supply chain

NASA Astrophysics Data System (ADS)

Bendriss, S.; Benabdelhafid, A.; Boukachour, J.

2008-06-01

For a long time, the traceability was applied only for management reasons, but with the advent of new communication and information technologies more and more used in the logistic medium, the notion of the traceability became new extensive to meet the new market needs in term of information by ensuring accessibility the data characteristic or been dependent on the product throughout its life cycle. On the basis of this postulate, we tried to raise some questions of research, beginning by the presentation of the progress achieved, assumptions and objective relating to the traceability, in the second time we mentioned principal work by showing how evolved the scientific question especially the information systems integrating the traceability were developed very little in the literature. Based on what was developed in the first part, we present our generic modeling approach of communicating product "smart object", able to take into account the various essential elements for its traceability: the product in its various states, various operations carried out on the product, resources used, its localization, and interactions between the product and its environment carried out on the basis of whole of service. In order to validate our generic modeling, a case of study representing an application in a context of food industry is presented.

A European Roadmap for Thermophysical Properties Metrology

NASA Astrophysics Data System (ADS)

Filtz, J.-R.; Wu, J.; Stacey, C.; Hollandt, J.; Monte, C.; Hay, B.; Hameury, J.; Villamañan, M. A.; Thurzo-Andras, E.; Sarge, S.

2015-03-01

A roadmap for thermophysical properties metrology was developed in spring 2011 by the Thermophysical Properties Working Group in the EURAMET Technical Committee in charge of Thermometry, Humidity and Moisture, and Thermophysical Properties metrology. This roadmapping process is part of the EURAMET (European Association of National Metrology Institutes) activities aiming to increase impact from national investment in European metrology R&D. The roadmap shows a shared vision of how the development of thermophysical properties metrology should be oriented over the next 15 years to meet future social and economic needs. Since thermophysical properties metrology is a very broad and varied field, the authors have limited this roadmap to the following families of properties: thermal transport properties (thermal conductivity, thermal diffusivity, etc.), radiative properties (emissivity, absorbance, reflectance, and transmittance), caloric quantities (specific heat, enthalpy, etc.), thermodynamic properties (PVT and phase equilibria properties), and temperature-dependent quantities (thermal expansion, compressibility, etc.). This roadmap identifies the main societal and economical triggers that drive developments in thermophysical properties metrology. The key topics considered are energy, environment, advanced manufacturing and processing, public safety, security, and health. Key targets that require improved thermophysical properties measurements are identified in order to address these triggers. Ways are also proposed for defining the necessary skills and the main useful means to be implemented. These proposals will have to be revised as needs and technologies evolve in the future.

Industrial graphene metrology.

PubMed

Kyle, Jennifer Reiber; Ozkan, Cengiz S; Ozkan, Mihrimah

2012-07-07

Graphene is an allotrope of carbon whose structure is based on one-atom-thick planar sheets of carbon atoms that are densely packed in a honeycomb crystal lattice. Its unique electrical and optical properties raised worldwide interest towards the design and fabrication of future electronic and optical devices with unmatched performance. At the moment, extensive efforts are underway to evaluate the reliability and performance of a number of such devices. With the recent advances in synthesizing large-area graphene sheets, engineers have begun investigating viable methodologies for conducting graphene metrology and quality control at industrial scales to understand a variety of reliability issues including defects, patternability, electrical, and physical properties. This review summarizes the current state of industrial graphene metrology and provides an overview of graphene metrology techniques. In addition, a recently developed large-area graphene metrology technique based on fluorescence quenching is introduced. For each metrology technique, the industrial metrics it measures are identified--layer thickness, edge structure, defects, Fermi level, and thermal conductivity--and a detailed description is provided as to how the measurements are performed. Additionally, the potential advantages of each technique for industrial use are identified, including throughput, scalability, sensitivity to substrate/environment, and on their demonstrated ability to achieve quantified results. The recently developed fluorescence-quenching metrology technique is shown to meet all the necessary criteria for industrial applications, rendering it the first industry-ready graphene metrology technique.

Laser Truss Sensor for Segmented Telescope Phasing

NASA Technical Reports Server (NTRS)

Liu, Duncan T.; Lay, Oliver P.; Azizi, Alireza; Erlig, Herman; Dorsky, Leonard I.; Asbury, Cheryl G.; Zhao, Feng

2011-01-01

A paper describes the laser truss sensor (LTS) for detecting piston motion between two adjacent telescope segment edges. LTS is formed by two point-to-point laser metrology gauges in a crossed geometry. A high-resolution (<30 nm) LTS can be implemented with existing laser metrology gauges. The distance change between the reference plane and the target plane is measured as a function of the phase change between the reference and target beams. To ease the bandwidth requirements for phase detection electronics (or phase meter), homodyne or heterodyne detection techniques have been used. The phase of the target beam also changes with the refractive index of air, which changes with the air pressure, temperature, and humidity. This error can be minimized by enclosing the metrology beams in baffles. For longer-term (weeks) tracking at the micron level accuracy, the same gauge can be operated in the absolute metrology mode with an accuracy of microns; to implement absolute metrology, two laser frequencies will be used on the same gauge. Absolute metrology using heterodyne laser gauges is a demonstrated technology. Complexity of laser source fiber distribution can be optimized using the range-gated metrology (RGM) approach.

Metrology in electricity and magnetism: EURAMET activities today and tomorrow

NASA Astrophysics Data System (ADS)

Piquemal, F.; Jeckelmann, B.; Callegaro, L.; Hällström, J.; Janssen, T. J. B. M.; Melcher, J.; Rietveld, G.; Siegner, U.; Wright, P.; Zeier, M.

2017-10-01

Metrology dedicated to electricity and magnetism has changed considerably in recent years. It encompasses almost all modern scientific, industrial, and societal challenges, e.g. the revision of the International System of Units, the profound transformation of industry, changes in energy use and generation, health, and environment, as well as nanotechnologies (including graphene and 2D materials) and quantum engineering. Over the same period, driven by the globalization of worldwide trade, the Mutual Recognition Arrangement (referred to as the CIPM MRA) was set up. As a result, the regional metrology organizations (RMOs) of national metrology institutes have grown in significance. EURAMET is the European RMO and has been very prominent in developing a strategic research agenda (SRA) and has established a comprehensive research programme. This paper reviews the highlights of EURAMET in electrical metrology within the European Metrology Research Programme and its main contributions to the CIPM MRA. In 2012 EURAMET undertook an extensive roadmapping exercise for proposed activities for the next decade which will also be discussed in this paper. This work has resulted in a new SRA of the second largest European funding programme: European Metrology Programme for Innovation and Research.

A range of newly developed mobile generators to dynamically produce SI-traceable reference gas mixtures for reactive compounds at atmospheric concentrations

NASA Astrophysics Data System (ADS)

Leuenberger, Daiana; Pascale, Céline; Guillevic, Myriam; Ackermann, Andreas; Niederhauser, Bernhard

2017-04-01

Three new mobile facilities have been developed at METAS to dynamically generate SI-traceable reference gas mixtures for a variety of reactive compounds at atmospheric amount of substance fractions and at very low levels of uncertainty (Ux < 3%). We present three new portable "Reactive Gas Standard ReGaS" reference gas generators for the realisation of the following substances: ReGaS1: Ammonia and nitrogen dioxide in the nmol/mol (ppb) range ReGaS2: Volatile organic compounds (VOCs), e.g. limonene, alpha-pinene, MVK, MEK in the nmol/mol (ppb) range ReGaS-3: Fluorinated gases (F-gases, i.e. containing fluorine atoms) in the pmol/mol (ppt) range These three mobile generators have been designed and manufactured at METAS in the framework of the three EMRP projects MetNH3, KEY-VOCs and HIGHGAS. The method is based on permeation and subsequent dynamic dilution: A permeation tube containing the pure substance (e.g. NH3) is stored in the permeation chamber at constant temperature, pressure and matrix gas flow (N2, purified air, synthetic air). Under such conditions the pure substance permeates at constant rate into the matrix gas and can be diluted thereafter to the desired amount fractions in one or two subsequent steps. The permeation rate (mass loss over time) of the permeation tube is precisely calibrated in a fully traceable magnetic suspension balance. The carrier gas is previously purified from the compounds of interest using commercially available purification cartridges. The permeation chambers of ReGaS2 and ReGaS3 have multiple individual cells allowing for the generation of mixtures containing up to 5 different components if required. ReGaS1 allows for the generation of one-component mixtures only. These primary mixtures are then diluted to the required amount of substance fractions using thermal mass flow controllers for full flexibility and adaptability of the generation process over the entire range of possible concentrations. In order to considerably reduce adsorption/desorption processes and thus stabilisation time, all electro-polished stainless steel parts of ReGaS1 and ReGaS2 in contact with the reference gas mixtures are passivated with SilcoNert2000® surface coating. These three state-of-the-art mobile reference gas generators are applicable under both, laboratory and field conditions. Moreover the dynamic generation method can be adapted and applied to a large variety of molecules (e.g. BTEX, CFCs, HCFCs, HFCs and other refrigerants) and is particularly suitable for reactive gas species and/or at concentration ranges which are unstable when stored in pressurised cylinders. Acknowledgement: This work was supported by the European Metrology Research Programme (EMRP). The EMRP is jointly funded by the EMRP participating countries within EURAMET and the European Union

Search for general relativistic effects in table-top displacement metrology

NASA Technical Reports Server (NTRS)

Halverson, Peter G.; Macdonald, Daniel R.; Diaz, Rosemary T.

2004-01-01

As displacement metrology accuracy improves, general relativistic effects will become noticeable. Metrology gauges developed for the Space Interferometry Mission were used to search for locally anisotropic space-time, with a null result at the 10 to the negative tenth power level.

Test Evaluation and Modification of Prototype Rotating Gravity Gradiometer

DTIC Science & Technology

1975-07-01

RECOMMENEATIONS 3 4.0 BEARINGS 6 4.1 Design 6 4.2 Metrology 6 4.3 Preassembly 14 5.0 TEST RIG 17 5.1 Design 17 5.2 Metrology 21 5.3 Assembly and...print requirements of 5 \\i inches TIR max. However, because of available (stare-of-the-art) metrology equipment limitations, no conclusion as to...gravity gradiometer are contained in Shaker Research Corporation drawing series 101 (see Appendix I), 4.2 Metrology The production of the

Tissue allograft coding and traceability in USM Tissue Bank, Malaysia.

PubMed

Sheikh Ab Hamid, Suzina; Abd Rahman, Muhamad Nor Firdaus

2010-11-01

In Malaysia, tissue banking activities began in Universiti Sains Malaysia (USM) Tissue Bank in early 1990s. Since then a few other bone banks have been set up in other government hospitals and institutions. However, these banks are not governed by the national authority. In addition there is no requirement set by the national regulatory authority on coding and traceability for donated human tissues for transplantation. Hence, USM Tissue Bank has taken the initiatives to adopt a system that enables the traceability of tissues between the donor, the processed tissue and the recipient based on other international standards for tissue banks. The traceability trail has been effective and the bank is certified compliance to the international standard ISO 9001:2008.

TF4SM: A Framework for Developing Traceability Solutions in Small Manufacturing Companies

PubMed Central

Bordel Sánchez, Borja; Alcarria, Ramón; Martín, Diego; Robles, Tomás

2015-01-01

Nowadays, manufacturing processes have become highly complex. Besides, more and more, governmental institutions require companies to implement systems to trace a product’s life (especially for foods, clinical materials or similar items). In this paper, we propose a new framework, based on cyber-physical systems, for developing traceability systems in small manufacturing companies (which because of their size cannot implement other commercial products). We propose a general theoretical framework, study the requirements of these companies in relation to traceability systems, propose a reference architecture based on both previous elements and build the first minimum functional prototype, to compare our solution to a traditional tag-based traceability system. Results show that our system reduces the number of inefficiencies and reaction time. PMID:26610509

TF4SM: A Framework for Developing Traceability Solutions in Small Manufacturing Companies.

PubMed

Bordel Sánchez, Borja; Alcarria, Ramón; Martín, Diego; Robles, Tomás

2015-11-20

Nowadays, manufacturing processes have become highly complex. Besides, more and more, governmental institutions require companies to implement systems to trace a product's life (especially for foods, clinical materials or similar items). In this paper, we propose a new framework, based on cyber-physical systems, for developing traceability systems in small manufacturing companies (which because of their size cannot implement other commercial products). We propose a general theoretical framework, study the requirements of these companies in relation to traceability systems, propose a reference architecture based on both previous elements and build the first minimum functional prototype, to compare our solution to a traditional tag-based traceability system. Results show that our system reduces the number of inefficiencies and reaction time.

AGILE integration into APC for high mix logic fab

NASA Astrophysics Data System (ADS)

Gatefait, M.; Lam, A.; Le Gratiet, B.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Kocsis, Z.; Smith, I.; Decaunes, J.; Ostrovsky, A.; Monget, C.

2015-09-01

For C040 technology and below, photolithographic depth of focus control and dispersion improvement is essential to secure product functionality. Critical 193nm immersion layers present initial focus process windows close to machine control capability. For previous technologies, the standard scanner sensor (Level sensor - LS) was used to map wafer topology and expose the wafer at the right Focus. Such optical embedded metrology, based on light reflection, suffers from reading issues that cannot be neglected anymore. Metrology errors are correlated to inspected product area for which material types and densities change, and so optical properties are not constant. Various optical phenomena occur across the product field during wafer inspection and have an effect on the quality and position of the reflected light. This can result in incorrect heights being recorded and exposures possibly being done out of focus. Focus inaccuracy associated to aggressive process windows on critical layers will directly impact product realization and therefore functionality and yield. ASML has introduced an air gauge sensor to complement the optical level sensor and lead to optimal topology metrology. The use of this new sensor is managed by the AGILE (Air Gauge Improved process LEveling) application. This measurement with no optical dependency will correct for optical inaccuracy of level sensor, and so improve best focus dispersion across the product. Due to the fact that stack complexity is more and more important through process steps flow, optical perturbation of standard Level sensor metrology is increasing and is becoming maximum for metallization layers. For these reasons AGILE feature implementation was first considered for contact and all metal layers. Another key point is that standard metrology will be sensitive to layer and reticle/product density. The gain of Agile will be enhanced for multiple product contribution mask and for complex System on Chip. Into ST context (High mix logic Fab) in term of product and technology portfolio AGILE corrects for up to 120nm of product topography error on process layer with less than 50nm depth of focus Based on tool functionalities delivered by ASML and on high volume manufacturing requirement, AGILE integration is a real challenge. Regarding ST requirements "Automatic AGILE" functionality developed by ASML was not a turnkey solution and a dedicated functionality was needed. A "ST homemade AGILE integration" has been fully developed and implemented within ASML and ST constraints. This paper describes this integration in our Advanced Process Control platform (APC).

education | News

Science.gov Websites

, agencies and professional associations. Introduction to metrology career day at St. Charles North High St. Charles North High School students to talk with them about metrology. Here, use a portable , a Fermilab metrology technical specialist, visited St. Charles North High School students to talk

Search for general relativistic effects in table-top displacement metrology

NASA Technical Reports Server (NTRS)

Halverson, Peter G.; Diaz, Rosemary T.; Macdonald, Daniel R.

2004-01-01

As displacement metrology accuracy improves, general relativistic effects will become noticeable. Metrology gauges developed for the Space Interferometry Mission, were used to search for locally anisotropic space-time, with a null result at the 10 to the negative 10th power level.

Fourier Transform Fringe-Pattern Analysis of an Absolute Distance Michelson Interferometer for Space-Based Laser Metrology.

NASA Astrophysics Data System (ADS)

Talamonti, James Joseph

1995-01-01

Future NASA proposals include the placement of optical interferometer systems in space for a wide variety of astrophysical studies including a vastly improved deflection test of general relativity, a precise and direct calibration of the Cepheid distance scale, and the determination of stellar masses (Reasenberg et al., 1988). There are also plans for placing large array telescopes on the moon with the ultimate objective of being able to measure angular separations of less than 10 mu-arc seconds (Burns, 1990). These and other future projects will require interferometric measurement of the (baseline) distance between the optical elements comprising the systems. Eventually, space qualifiable interferometers capable of picometer (10^{-12}m) relative precision and nanometer (10^{ -9}m) absolute precision will be required. A numerical model was developed to emulate the capabilities of systems performing interferometric noncontact absolute distance measurements. The model incorporates known methods to minimize signal processing and digital sampling errors and evaluates the accuracy limitations imposed by spectral peak isolation using Hanning, Blackman, and Gaussian windows in the Fast Fourier Transform Technique. We applied this model to the specific case of measuring the relative lengths of a compound Michelson interferometer using a frequency scanned laser. By processing computer simulated data through our model, the ultimate precision is projected for ideal data, and data containing AM/FM noise. The precision is shown to be limited by non-linearities in the laser scan. A laboratory system was developed by implementing ultra-stable external cavity diode lasers into existing interferometric measuring techniques. The capabilities of the system were evaluated and increased by using the computer modeling results as guidelines for the data analysis. Experimental results measured 1-3 meter baselines with <20 micron precision. Comparison of the laboratory and modeling results showed that the laboratory precisions obtained were of the same order of magnitude as those predicted for computer generated results under similar conditions. We believe that our model can be implemented as a tool in the design for new metrology systems capable of meeting the precisions required by space-based interferometers.

EUV-angle resolved scatter (EUV-ARS): a new tool for the characterization of nanometre structures

NASA Astrophysics Data System (ADS)

Fernández Herrero, Analía.; Mentzel, Heiko; Soltwisch, Victor; Jaroslawzew, Sina; Laubis, Christian; Scholze, Frank

2018-03-01

The advance of the semiconductor industry requires new metrology methods, which can deal with smaller and more complex nanostructures. Particularly for inline metrology a rapid, sensitive and non destructive method is needed. Small angle X-ray scattering under grazing incidence has already been investigated for this application and delivers significant statistical information which tracks the profile parameters as well as their variations, i.e. roughness. However, it suffers from the elongated footprint at the sample. The advantage of EUV radiation, with its longer wavelengths, is that larger incidence angles can be used, resulting in a significant reduction of the beam footprint. Targets with field sizes of 100 μm and smaller are accessible with our experimental set-up. We present a new experimental tool for the measurement of small structures based on the capabilities of soft X-ray and EUV scatterometry at the PTB soft X-ray beamline at the electron storage ring BESSY II. PTB's soft X-ray radiometry beamline uses a plane grating monochromator, which covers the spectral range from 0.7 nm to 25 nm and was especially designed to provide highly collimated radiation. An area detector covers the scattered radiation from a grazing exit angle up to an angle of 30° above the sample horizon and the fluorescence emission can be detected with an energy dispersive X-ray silicon drift detector. In addition, the sample can be rotated and linearly moved in vacuum. This new set-up will be used to explore the capabilities of EUV-scatterometry for the characterization of nanometre-sized structures.

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

NASA Astrophysics Data System (ADS)

Lacey, Ian; Adam, Jérôme; Centers, Gary P.; Gevorkyan, Gevork S.; Nikitin, Sergey M.; Smith, Brian V.; Yashchuk, Valeriy V.

2017-09-01

The research and development work on the Advanced Light Source (ALS) upgrade to a diffraction limited storage ring light source, ALS-U, has brought to focus the need for near-perfect x-ray optics, capable of delivering light to experiments without significant degradation of brightness and coherence. The desired surface quality is characterized with residual (after subtraction of an ideal shape) surface slope and height errors of <50-100 nrad (rms) and <1-2 nm (rms), respectively. The ex-situ metrology that supports the optimal usage of the optics at the beamlines has to offer even higher measurement accuracy. At the ALS X-Ray Optics Laboratory, we are developing a new surface slope profiler, the Optical Surface Measuring System (OSMS), capable of two-dimensional (2D) surface-slope metrology at an absolute accuracy below the above optical specification. In this article we provide the results of comprehensive characterization of the key elements of the OSMS, a NOM-like high-precision granite gantry system with air-bearing translation and a custom-made precision air-bearing stage for tilting and flipping the surface under test. We show that the high performance of the gantry system allows implementing an original scanning mode for 2D mapping. We demonstrate the efficiency of the developed 2D mapping via comparison with 1D slope measurements performed with the same hyperbolic test mirror using the ALS developmental long trace profiler. The details of the OSMS design and the developed measuring techniques are also provided.

Electromagnetic characterization of advanced nanostructured materials and multilayer design optimization for metrological and low radar observability applications

NASA Astrophysics Data System (ADS)

Micheli, Davide; Pastore, Roberto; Delfini, Andrea; Giusti, Alfonso; Vricella, Antonio; Santoni, Fabio; Marchetti, Mario; Tolochko, Oleg; Vasilyeva, Ekaterina

2017-05-01

In this work the electromagnetic characterization of composite materials reinforced with carbon and metallic nanoparticles is presented. In particular, the electric permittivity and the magnetic permeability as a function of the frequency are used to evaluate the electromagnetic absorption capability of the nanocomposites. The aim is the study of possible applications in advanced coating able to tune the electromagnetic reflectivity of satellite surfaces in specific frequency ranges, in a special way for those surfaces that for some reason could be exposed to the antenna radiation pattern. In fact, the interference caused by the spurious electromagnetic multipath due to good electric conductive satellite surface components could in turn affect the main radiation lobe of TLC and Telemetry antennas, thus modifying its main propagation directions and finally increasing the microwave channel pathloss. The work reports the analysis of different nanostructured materials in the 2-10 GHz frequency range. The employed nanopowders are of carbon nanotubes, cobalt, argent, titanium, nickel, zinc, copper, iron, boron, bismuth, hafnium, in different weight percentages versus the hosting polymeric matrix. The materials are classified as a function of their electromagnetic losses capability by taking into account of both electric and magnetic properties. The possibility to design multi-layered structures optimized to provide specific microwave response is finally analyzed by the aid of swam intelligence algorithm. This novel technique is in general interesting for metrological purpose and remote sensing purposes, and can be effectively used in aerospace field for frequency selective materials design, in order to reduce the aircraft/spacecraft radar observability at certain frequencies.

Hybrid overlay metrology with CDSEM in a BEOL patterning scheme

NASA Astrophysics Data System (ADS)

Leray, Philippe; Jehoul, Christiane; Inoue, Osamu; Okagawa, Yutaka

2015-03-01

Overlay metrology accuracy is a major concern for our industry. Advanced logic process require more tighter overlay control for multipatterning schemes. TIS (Tool Induced Shift) and WIS (Wafer Induced Shift) are the main issues for IBO (Image Based Overlay) and DBO (Diffraction Based Overlay). Methods of compensation have been introduced, some are even very efficient to reduce these measured offsets. Another related question is about the overlay target designs. These targets are never fully representative of the design rules, strong efforts have been achieved, but the device cannot be completely duplicated. Ideally, we would like to measure in the device itself to verify the real overlay value. Top down CDSEM can measure critical dimensions of any structure, it is not dependent of specific target design. It can also measure the overlay errors but only in specific cases like LELE (Litho Etch Litho Etch) after final patterning. In this paper, we will revisit the capability of the CDSEM at final patterning by measuring overlay in dedicated targets as well as inside a logic and an SRAM design. In the dedicated overlay targets, we study the measurement differences between design rules gratings and relaxed pitch gratings. These relaxed pitch which are usually used in IBO or DBO targets. Beyond this "simple" LELE case, we will explore the capability of the CDSEM to measure overlay even if not at final patterning, at litho level. We will assess the hybridization of DBO and CDSEM for reference to optical tools after final patterning. We will show that these reference data can be used to validate the DBO overlay results (correctables and residual fingerprints).

Hydrothermal synthesis of nitrogen-doped carbon dots with real-time live-cell imaging and blood-brain barrier penetration capabilities.

PubMed

Lu, Shousi; Guo, Shanshan; Xu, Pingxiang; Li, Xiaorong; Zhao, Yuming; Gu, Wei; Xue, Ming

Nitrogen-doped carbon dots (N-CDs) were synthesized using a one-pot hydrothermal treatment with citric acid in the presence of polyethylenimine. Transmission electron microscopy analysis revealed that the N-CDs were monodispersed and quasi-spherical with an average size of ~2.6 nm. Under ultraviolet irradiation the N-CDs emitted a strong blue luminescence with a quantum yield as high as 51%. Moreover, the N-CDs exhibited a negligible cytotoxicity and could be applied as efficient nanoprobes for real-time imaging of live cells. In addition, the ability of the N-CDs to cross the blood-brain barrier (BBB) in a concentration-dependent manner was demonstrated using an in vitro BBB model. Therefore, these PEI-passivated N-CDs with real-time live-cell imaging and BBB-penetration capabilities hold promise for traceable drug delivery to the brain.

Hydrothermal synthesis of nitrogen-doped carbon dots with real-time live-cell imaging and blood–brain barrier penetration capabilities

PubMed Central

Lu, Shousi; Guo, Shanshan; Xu, Pingxiang; Li, Xiaorong; Zhao, Yuming; Gu, Wei; Xue, Ming

2016-01-01

Nitrogen-doped carbon dots (N-CDs) were synthesized using a one-pot hydrothermal treatment with citric acid in the presence of polyethylenimine. Transmission electron microscopy analysis revealed that the N-CDs were monodispersed and quasi-spherical with an average size of ~2.6 nm. Under ultraviolet irradiation the N-CDs emitted a strong blue luminescence with a quantum yield as high as 51%. Moreover, the N-CDs exhibited a negligible cytotoxicity and could be applied as efficient nanoprobes for real-time imaging of live cells. In addition, the ability of the N-CDs to cross the blood–brain barrier (BBB) in a concentration-dependent manner was demonstrated using an in vitro BBB model. Therefore, these PEI-passivated N-CDs with real-time live-cell imaging and BBB-penetration capabilities hold promise for traceable drug delivery to the brain. PMID:27932880

All chain Loran-C time synchronization

NASA Technical Reports Server (NTRS)

Sherman, H. T.

1973-01-01

A program is in progress to implement coordinated universal time (UTC) synchronization on all Loran-C transmissions. The present capability is limited to five Loran-C chains in which the tolerance is twenty-five microseconds with respect to UTC. Upon completion of the program, the transmissions of all Loran-C chains will be maintained within five microseconds of UTC. The improvement plan consists of equipping selected Loran-C transmitting stations for greater precision of frequency standard adjustment and improved monitoring capability. External time monitor stations will utilize television time transfer techniques with nearby SATCOM terminals where practicable, thus providing the requisite traceability to the Naval Observatory. The monitor equipment groups and the interrelationships with the ground station equipment are discussed. After a brief review of control doctrine, forth-coming improvements to transmitting stations and how the time monitor and navigation equipments will complement each other resulting in improved service to all users of the Loran-C system are described.

Results of Absolute Cavity Pyrgeometer and Infrared Integrating Sphere Comparisons

DOE Office of Scientific and Technical Information (OSTI.GOV)

Reda, Ibrahim M; Sengupta, Manajit; Dooraghi, Michael R

Accurate and traceable atmospheric longwave irradiance measurements are required for understanding radiative impacts on the Earth's energy budget. The standard to which pyrgeometers are traceable is the interim World Infrared Standard Group (WISG), maintained in the Physikalisch-Meteorologisches Observatorium Davos (PMOD). The WISG consists of four pyrgeometers that were calibrated using Rolf Philipona's Absolute Sky-scanning Radiometer [1]. The Atmospheric Radiation Measurement (ARM) facility has recently adopted the WISG to maintain the traceability of the calibrations of all Eppley precision infrared radiometer (PIR) pyrgeometers. Subsequently, Julian Grobner [2] developed the infrared interferometer spectrometer and radiometer (IRIS) radiometer, and Ibrahim Reda [3] developedmore » the absolute cavity pyrgeometer (ACP). The ACP and IRIS were developed to establish a world reference for calibrating pyrgeometers with traceability to the International System of Units (SI). The two radiometers are unwindowed with negligible spectral dependence, and they are traceable to SI units through the temperature scale (ITS-90). The two instruments were compared directly to the WISG three times at PMOD and twice at the Southern Great Plains (SGP) facility to WISG-traceable pyrgeometers. The ACP and IRIS agreed within +/- 1 W/m2 to +/- 3 W/m2 in all comparisons, whereas the WISG references exhibit a 2-5 Wm2 low bias compared to the ACP/IRIS average, depending on the water vapor column, as noted in Grobner et al. [4]. Consequently, a case for changing the current WISG has been made by Grobner and Reda. However, during the five comparisons the column water vapor exceeded 8 mm. Therefore, it is recommended that more ACP and IRIS comparisons should be held under different environmental conditions and water vapor column content to better establish the traceability of these instruments to SI with established uncertainty.« less

a Review on Legal Traceability of Gnss Measurements in the Malaysian Cadastral Practice

NASA Astrophysics Data System (ADS)

Gill, J.; Shariff, N. S.; Omar, K. M.; Din, A. H. M.; Amin, Z. M.

2016-09-01

As the dependency on Global Navigation Satellite System (GNSS) in surveying has been growing over the years, the need for legal traceability of GNSS measurements has become a significant matter. In Malaysia, with the advent of the Malaysia Real-time Kinematic Network (MyRTKnet), GNSS surveying has revolutionised land survey and mapping. Correspondingly, the Department of Survey and Mapping Malaysia (DSMM) amended and published standard regulations and guidelines concerning cadastral survey, i.e., Cadastral Survey Regulations 2009, to include GNSS measurements. However, these regulations and guidelines has not comprehensively incorporated legal traceability of GNSS measurements; which is a prerequisite for cadastral surveys as it requires reliable and conclusive evidence for issues such as boundary disputes. The first objective of this paper is to review and discuss the legal traceability of GNSS measurements. Secondly, it will highlight the current practice and issues, i.e., with regard to legal traceability, within the present Malaysian cadastral regulation and guidelines, in relation to the prevalently adopted Network RTK (N-RTK) technique, GNSS instrument calibrations, and reference stations' accuracy. Lastly, a rudimentary best practice guideline for GNSS surveying in cadastral survey for Malaysia is proposed. It is expected that this paper will contribute to the implementation of a best practice guideline, which is inclusive of legal traceability of GNSS measurements, for the Malaysian cadastral practice.

Network placement optimization for large-scale distributed system

NASA Astrophysics Data System (ADS)

Ren, Yu; Liu, Fangfang; Fu, Yunxia; Zhou, Zheng

2018-01-01

The network geometry strongly influences the performance of the distributed system, i.e., the coverage capability, measurement accuracy and overall cost. Therefore the network placement optimization represents an urgent issue in the distributed measurement, even in large-scale metrology. This paper presents an effective computer-assisted network placement optimization procedure for the large-scale distributed system and illustrates it with the example of the multi-tracker system. To get an optimal placement, the coverage capability and the coordinate uncertainty of the network are quantified. Then a placement optimization objective function is developed in terms of coverage capabilities, measurement accuracy and overall cost. And a novel grid-based encoding approach for Genetic algorithm is proposed. So the network placement is optimized by a global rough search and a local detailed search. Its obvious advantage is that there is no need for a specific initial placement. At last, a specific application illustrates this placement optimization procedure can simulate the measurement results of a specific network and design the optimal placement efficiently.

Bio-markers: traceability in food safety issues.

PubMed

Raspor, Peter

2005-01-01

Research and practice are focusing on development, validation and harmonization of technologies and methodologies to ensure complete traceability process throughout the food chain. The main goals are: scale-up, implementation and validation of methods in whole food chains, assurance of authenticity, validity of labelling and application of HACCP (hazard analysis and critical control point) to the entire food chain. The current review is to sum the scientific and technological basis for ensuring complete traceability. Tracing and tracking (traceability) of foods are complex processes due to the (bio)markers, technical solutions and different circumstances in different technologies which produces various foods (processed, semi-processed, or raw). Since the food is produced for human or animal consumption we need suitable markers to be stable and traceable all along the production chain. Specific biomarkers can have a function in technology and in nutrition. Such approach would make this development faster and more comprehensive and would make possible that food effect could be monitored with same set of biomarkers in consumer. This would help to develop and implement food safety standards that would be based on real physiological function of particular food component.

Molecular traceability of beef from synthetic Mexican bovine breeds.

PubMed

Rodríguez-Ramírez, R; Arana, A; Alfonso, L; González-Córdova, A F; Torrescano, G; Guerrero Legarreta, I; Vallejo-Cordoba, B

2011-10-06

Traceability ensures a link between carcass, quarters or cuts of beef and the individual animal or the group of animals from which they are derived. Meat traceability is an essential tool for successful identification and recall of contaminated products from the market during a food crisis. Meat traceability is also extremely important for protection and value enhancement of good-quality brands. Molecular meat traceability would allow verification of conventional methods used for beef tracing in synthetic Mexican bovine breeds. We evaluated a set of 11 microsatellites for their ability to identify animals belonging to these synthetic breeds, Brangus and Charolais/Brahman (78 animals). Seven microsatellite markers allowed sample discrimination with a match probability, defined as the probability of finding two individuals sharing by chance the same genotypic profile, of 10(-8). The practical application of the marker set was evaluated by testing eight samples from carcasses and pieces of meat at the slaughterhouse and at the point of sale. The DNA profiles of the two samples obtained at these two different points in the production-commercialization chain always proved that they came from the same animal.

EDITORIAL: Advances in Measurement Technology and Intelligent Instruments for Production Engineering

NASA Astrophysics Data System (ADS)

Gao, Wei; Takaya, Yasuhiro; Gao, Yongsheng; Krystek, Michael

2008-08-01

Measurement and instrumentation have long played an important role in Production Engineering, through supporting both the traditional field of manufacturing and the new field of micro/nano-technology. Papers published in this special feature were selected and updated from those presented at The 8th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2007) held at Tohoku University, Sendai, Japan, on 24-27 September 2007. ISMTII 2007 was organized by ICMI (The International Committee on Measurements and Instrumentation), Japan Society for Precision Engineering (JSPE, Technical Committee of Intelligent Measurement with Nanoscale), Korean Society for Precision Engineering (KSPE), Chinese Society for Measurement (CSM) and Tohoku University. The conference was also supported by Center for Precision Metrology of UNC Charlotte and Singapore Institute of Manufacturing Technology. A total of 220 papers, including four keynote papers, were presented at ISMTII 2007, covering a wide range of topics, including micro/nano-metrology, precision measurement, online & in-process measurement, surface metrology, optical metrology & image processing, biomeasurement, sensor technology, intelligent measurement & instrumentation, uncertainty, traceability & calibration, and signal processing algorithms. The guest editors recommended publication of updated versions of some of the best ISMTII 2007 papers in this special feature of Measurement Science and Technology. The first two papers were presented in ISMTII 2007 as keynote papers. Takamasu et al from The University of Tokyo report uncertainty estimation for coordinate metrology, in which methods of estimating uncertainties using the coordinate measuring system after calibration are formulated. Haitjema, from Mitutoyo Research Center Europe, treats the most often used interferometric measurement techniques (displacement interferometry and surface interferometry) and their major sources of errors. Among the other papers, two are related to length measurement, which forms the basis of dimensional measurement. Schödel et al from Physikalisch Technische Bundesanstalt (PTB) describe the recent state of thermal expansion measurements with PTB's Precision Interferometer, which are based on the observation of the absolute length of samples by using phase stepping interferometry. Meiners-Hagen et al, also from PTB, investigate an improved method for compensation of the refractive index of air in length measurements by optical interferometry where the air pressure and the humidity are measured. Three papers concern surface metrology. Song et al from NIST (National Institutes of Standards and Technology) report topography measurement for determining the decay factors in surface replication of Standard Casing to support ballistics measurements in the US. Takahashi et al from the University of Tokyo present a lateral resolution improvement for a total internal reflection fluorescence microscope that employs the combined use of standing evanescent light and a scattering distribution retrieval algorithm with successive approximation. X Liu et al from Warwick University report on a new investigation into how surface topography and friction affect the touch-feel perception, with the results showing that both the measured roughness and friction coefficient have a strong correlation with rough-smooth and grippy-slippery feelings. Measurement algorithms and calibration are described in the following three papers. Hessling from SP Technical Research Institute of Sweden presents a general unprecedented framework for dynamic evaluation of measurement systems, which separates physical experiments, analysis and signal processing methods into succeeding steps of evaluations. Wübbeler et al from PTB illustrate the Monte Carlo method required for the numerical calculations of the probability density function approach, which has been proposed for evaluation of measurement uncertainty. Neuschaefer-Rube et al, also from PTB, present procedures and standards to test tactile and optical microsensors and micro-computed tomography systems, which are similar to the established tests for classical coordinate measuring machines and assess local and global sensor characteristics. The last three papers are related to micro/nano-metrology and intelligent instrumentation. Jiang et al from Tohoku University describe the fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection by using spin-out diffusion, EB lithography and FAB etching, respectively. Y-C Liu et al from National Taiwan University develop an economical and highly sensitive optical accelerometer using a commercial optical pickup head. Michihata et al from Osaka University experimentally investigate the positioning sensing property and accuracy of a laser trapping probe for a nano-coordinate measuring machine. As guest editors, we believe that this special feature presents the newest information on advances in measurement technology and intelligent instruments from basic research to applied systems for Production Engineering. We would like to thank all the authors for their great contributions to this special feature and the referees for their careful reviews of the papers. We would also like to express our thanks and appreciation to Professor P Hauptmann, Editor-in-Chief of MST, for his kind offer to publish selected ISMTII 2007 papers in MST, and to the publishing staff of MST for their dedicated efforts that have made this special feature possible.

Issues of Teaching Metrology in Higher Education Institutions of Civil Engineering in Russia

ERIC Educational Resources Information Center

Pukharenko, Yurii Vladimirovich; Norin, Veniamin Aleksandrovich

2017-01-01

The work analyses the training process condition in teaching the discipline "Metrology, Standardization, Certification and Quality Control." It proves that the current educational standard regarding the instruction of the discipline "Metrology, Standardization, Certification and Quality Control" does not meet the needs of the…

Metrology Careers: Jobs for Good Measure

ERIC Educational Resources Information Center

Liming, Drew

2009-01-01

What kind of career rewards precision and accuracy? One in metrology--the science of measurement. By evaluating and calibrating the technology in people's everyday lives, metrologists keep their world running smoothly. Metrology is used in the design and production of almost everything people encounter daily, from the cell phones in their pockets…

Adjustment method for embedded metrology engine in an EM773 series microcontroller.

PubMed

Blazinšek, Iztok; Kotnik, Bojan; Chowdhury, Amor; Kačič, Zdravko

2015-09-01

This paper presents the problems of implementation and adjustment (calibration) of a metrology engine embedded in NXP's EM773 series microcontroller. The metrology engine is used in a smart metering application to collect data about energy utilization and is controlled with the use of metrology engine adjustment (calibration) parameters. The aim of this research is to develop a method which would enable the operators to find and verify the optimum parameters which would ensure the best possible accuracy. Properly adjusted (calibrated) metrology engines can then be used as a base for variety of products used in smart and intelligent environments. This paper focuses on the problems encountered in the development, partial automatisation, implementation and verification of this method. Copyright © 2015 ISA. Published by Elsevier Ltd. All rights reserved.

The European Comparison of Absolute Gravimeters 2011 (ECAG-2011) in Walferdange, Luxembourg: results and recommendations

NASA Astrophysics Data System (ADS)

Francis, Olivier; Baumann, Henri; Volarik, Tomas; Rothleitner, Christian; Klein, Gilbert; Seil, Marc; Dando, Nicolas; Tracey, Ray; Ullrich, Christian; Castelein, Stefaan; Hua, Hu; Kang, Wu; Chongyang, Shen; Songbo, Xuan; Hongbo, Tan; Zhengyuan, Li; Pálinkás, Vojtech; Kostelecký, Jakub; Mäkinen, Jaakko; Näränen, Jyri; Merlet, Sébastien; Farah, Tristan; Guerlin, Christine; Pereira Dos Santos, Franck; Le Moigne, Nicolas; Champollion, Cédric; Deville, Sabrina; Timmen, Ludger; Falk, Reinhard; Wilmes, Herbert; Iacovone, Domenico; Baccaro, Francesco; Germak, Alessandro; Biolcati, Emanuele; Krynski, Jan; Sekowski, Marcin; Olszak, Tomasz; Pachuta, Andrzej; Agren, Jonas; Engfeldt, Andreas; Reudink, René; Inacio, Pedro; McLaughlin, Daniel; Shannon, Geoff; Eckl, Marc; Wilkins, Tim; van Westrum, Derek; Billson, Ryan

2013-06-01

We present the results of the third European Comparison of Absolute Gravimeters held in Walferdange, Grand Duchy of Luxembourg, in November 2011. Twenty-two gravimeters from both metrological and non-metrological institutes are compared. For the first time, corrections for the laser beam diffraction and the self-attraction of the gravimeters are implemented. The gravity observations are also corrected for geophysical gravity changes that occurred during the comparison using the observations of a superconducting gravimeter. We show that these corrections improve the degree of equivalence between the gravimeters. We present the results for two different combinations of data. In the first one, we use only the observations from the metrological institutes. In the second solution, we include all the data from both metrological and non-metrological institutes. Those solutions are then compared with the official result of the comparison published previously and based on the observations of the metrological institutes and the gravity differences at the different sites as measured by non-metrological institutes. Overall, the absolute gravity meters agree with one another with a standard deviation of 3.1 µGal. Finally, the results of this comparison are linked to previous ones. We conclude with some important recommendations for future comparisons.

Seafood traceability: current needs, available tools, and biotechnological challenges for origin certification.

PubMed

Leal, Miguel Costa; Pimentel, Tânia; Ricardo, Fernando; Rosa, Rui; Calado, Ricardo

2015-06-01

Market globalization and recurring food safety alerts have resulted in a growing consumer awareness of the need for food traceability. This is particularly relevant for seafood due to its perishable nature and importance as a key protein source for the population of the world. Here, we provide an overview of the current needs for seafood origin traceability, along with the limitations and challenges for its implementation. We focus on geochemical, biochemical, and molecular tools and how they should be optimized to be implemented globally and to address our societal needs. We suggest that seafood traceability is key to enforcing food safety regulations and fisheries control, combat fraud, and fulfill present and future expectations of conscientious producers, consumers, and authorities. Copyright © 2015 Elsevier Ltd. All rights reserved.

General Framework for Animal Food Safety Traceability Using GS1 and RFID

NASA Astrophysics Data System (ADS)

Cao, Weizhu; Zheng, Limin; Zhu, Hong; Wu, Ping

GS1 is global traceability standard, which is composed by the encoding system (EAN/UCC, EPC), the data carriers identified automatically (bar codes, RFID), electronic data interchange standards (EDI, XML). RFID is a non-contact, multi-objective automatic identification technique. Tracing of source food, standardization of RFID tags, sharing of dynamic data are problems to solve urgently for recent traceability systems. The paper designed general framework for animal food safety traceability using GS1 and RFID. This framework uses RFID tags encoding with EPCglobal tag data standards. Each information server has access tier, business tier and resource tier. These servers are heterogeneous and distributed, providing user access interfaces by SOAP or HTTP protocols. For sharing dynamic data, discovery service and object name service are used to locate dynamic distributed information servers.

The Role of a Physical Analysis Laboratory in a 300 mm IC Development and Manufacturing Centre

NASA Astrophysics Data System (ADS)

Kwakman, L. F. Tz.; Bicais-Lepinay, N.; Courtas, S.; Delille, D.; Juhel, M.; Trouiller, C.; Wyon, C.; de la Bardonnie, M.; Lorut, F.; Ross, R.

2005-09-01

To remain competitive IC manufacturers have to accelerate the development of most advanced (CMOS) technology and to deliver high yielding products with best cycle times and at a competitive pricing. With the increase of technology complexity, also the need for physical characterization support increases, however many of the existing techniques are no longer adequate to effectively support the 65-45 nm technology node developments. New and improved techniques are definitely needed to better characterize the often marginal processes, but these should not significantly impact fabrication costs or cycle time. Hence, characterization and metrology challenges in state-of-the-art IC manufacturing are both of technical and economical nature. TEM microscopy is needed for high quality, high volume analytical support but several physical and practical hurdles have to be taken. The success rate of FIB-SEM based failure analysis drops as defects often are too small to be detected and fault isolation becomes more difficult in the nano-scale device structures. To remain effective and efficient, SEM and OBIRCH techniques have to be improved or complemented with other more effective methods. Chemical analysis of novel materials and critical interfaces requires improvements in the field of e.g. SIMS, ToF-SIMS. Techniques that previously were only used sporadically, like EBSD and XRD, have become a `must' to properly support backend process development. At the bright side, thanks to major technical advances, techniques that previously were practiced at laboratory level only now can be used effectively for at-line fab metrology: Voltage Contrast based defectivity control, XPS based gate dielectric metrology and XRD based control of copper metallization processes are practical examples. In this paper capabilities and shortcomings of several techniques and corresponding equipment are presented with practical illustrations of use in our Crolles facilities.

Deep sub-wavelength metrology for advanced defect classification

NASA Astrophysics Data System (ADS)

van der Walle, P.; Kramer, E.; van der Donck, J. C. J.; Mulckhuyse, W.; Nijsten, L.; Bernal Arango, F. A.; de Jong, A.; van Zeijl, E.; Spruit, H. E. T.; van den Berg, J. H.; Nanda, G.; van Langen-Suurling, A. K.; Alkemade, P. F. A.; Pereira, S. F.; Maas, D. J.

2017-06-01

Particle defects are important contributors to yield loss in semi-conductor manufacturing. Particles need to be detected and characterized in order to determine and eliminate their root cause. We have conceived a process flow for advanced defect classification (ADC) that distinguishes three consecutive steps; detection, review and classification. For defect detection, TNO has developed the Rapid Nano (RN3) particle scanner, which illuminates the sample from nine azimuth angles. The RN3 is capable of detecting 42 nm Latex Sphere Equivalent (LSE) particles on XXX-flat Silicon wafers. For each sample, the lower detection limit (LDL) can be verified by an analysis of the speckle signal, which originates from the surface roughness of the substrate. In detection-mode (RN3.1), the signal from all illumination angles is added. In review-mode (RN3.9), the signals from all nine arms are recorded individually and analyzed in order to retrieve additional information on the shape and size of deep sub-wavelength defects. This paper presents experimental and modelling results on the extraction of shape information from the RN3.9 multi-azimuth signal such as aspect ratio, skewness, and orientation of test defects. Both modeling and experimental work confirm that the RN3.9 signal contains detailed defect shape information. After review by RN3.9, defects are coarsely classified, yielding a purified Defect-of-Interest (DoI) list for further analysis on slower metrology tools, such as SEM, AFM or HIM, that provide more detailed review data and further classification. Purifying the DoI list via optical metrology with RN3.9 will make inspection time on slower review tools more efficient.