Resolving Overlimiting Current Mechanisms in Microchannel-Nanochannel Interface Devices

NASA Astrophysics Data System (ADS)

Yossifon, Gilad; Leibowitz, Neta; Liel, Uri; Schiffbauer, Jarrod; Park, Sinwook

2015-11-01

We present results demonstrating the space charge-mediated transition between classical, diffusion-limited current and surface-conduction dominant over-limiting currents in a shallow micro-nanochannel device. The extended space charge layer develops at the depleted micro-nanochannel entrance at high current and is correlated with a distinctive maximum in the dc resistance. Experimental results for a shallow surface-conduction dominated system are compared with theoretical models, allowing estimates of the effective surface charge at high voltage to be obtained. Further, we extend the study to microchannels of moderate to large depths where the role of various electro-convection mechanisms becomes dominant. In particular, electro-osmotic of the second kind and electro-osmotic instability (EOI) which competes each other at geometrically heterogeneous (e.g. undulated nanoslot interface, array of nanoslots) nanoslot devices. Also, these effects are also shown to be strongly modulated by the non-ideal permselectivity of the nanochannel.

Shell-binary nanoparticle materials with variable electrical and electro-mechanical properties.

PubMed

Zhang, P; Bousack, H; Dai, Y; Offenhäusser, A; Mayer, D

2018-01-18

Nanoparticle (NP) materials with the capability to adjust their electrical and electro-mechanical properties facilitate applications in strain sensing technology. Traditional NP materials based on single component NPs lack a systematic and effective means of tuning their electrical and electro-mechanical properties. Here, we report on a new type of shell-binary NP material fabricated by self-assembly with either homogeneous or heterogeneous arrangements of NPs. Variable electrical and electro-mechanical properties were obtained for both materials. We show that the electrical and electro-mechanical properties of these shell-binary NP materials are highly tunable and strongly affected by the NP species as well as their corresponding volume fraction ratio. The conductivity and the gauge factor of these shell-binary NP materials can be altered by about five and two orders of magnitude, respectively. These shell-binary NP materials with different arrangements of NPs also demonstrate different volume fraction dependent electro-mechanical properties. The shell-binary NP materials with a heterogeneous arrangement of NPs exhibit a peaking of the sensitivity at medium mixing ratios, which arises from the aggregation induced local strain enhancement. Studies on the electron transport regimes and micro-morphologies of these shell-binary NP materials revealed the different mechanisms accounting for the variable electrical and electro-mechanical properties. A model based on effective medium theory is used to describe the electrical and electro-mechanical properties of such shell-binary nanomaterials and shows an excellent match with experiment data. These shell-binary NP materials possess great potential applications in high-performance strain sensing technology due to their variable electrical and electro-mechanical properties.

Quenching rate for a nonlocal problem arising in the micro-electro mechanical system

NASA Astrophysics Data System (ADS)

Guo, Jong-Shenq; Hu, Bei

2018-03-01

In this paper, we study the quenching rate of the solution for a nonlocal parabolic problem which arises in the study of the micro-electro mechanical system. This question is equivalent to the stabilization of the solution to the transformed problem in self-similar variables. First, some a priori estimates are provided. In order to construct a Lyapunov function, due to the lack of time monotonicity property, we then derive some very useful and challenging estimates by a delicate analysis. Finally, with this Lyapunov function, we prove that the quenching rate is self-similar which is the same as the problem without the nonlocal term, except the constant limit depends on the solution itself.

Sound wave resonances in micro-electro-mechanical systems devices vibrating at high frequencies according to the kinetic theory of gases

NASA Astrophysics Data System (ADS)

Desvillettes, Laurent; Lorenzani, Silvia

2012-09-01

The mechanism leading to gas damping in micro-electro-mechanical systems (MEMS) devices vibrating at high frequencies is investigated by using the linearized Boltzmann equation based on simplified kinetic models and diffuse reflection boundary conditions. Above a certain frequency of oscillation, the sound waves propagating through the gas are trapped in the gaps between the moving elements and the fixed boundaries of the microdevice. In particular, we found a scaling law, valid for all Knudsen numbers Kn (defined as the ratio between the gas mean free path and a characteristic length of the gas flow), that predicts a resonant response of the system. This response enables a minimization of the damping force exerted by the gas on the oscillating wall of the microdevice.

GRC-2011-C-00579

NASA Image and Video Library

2007-03-28

Photos for Web Feature by Victoria (Tori) Woods; Micro-Electro Mechanical Systems (MEMS) using vacuum technology; fabricating High Temperature Electronics for Harsh Environments using silicon carbide substrates

MEMS device for spacecraft thermal control applications

NASA Technical Reports Server (NTRS)

Swanson, Theordore D. (Inventor)

2003-01-01

A micro-electromechanical device that comprises miniaturized mechanical louvers, referred to as Micro Electro-Mechanical Systems (MEMS) louvers are employed to achieve a thermal control function for spacecraft and instruments. The MEMS louvers are another form of a variable emittance control coating and employ micro-electromechanical technology. In a function similar to traditional, macroscopic thermal louvers, the MEMS louvers of the present invention change the emissivity of a surface. With the MEMS louvers, as with the traditional macroscopic louvers, a mechanical vane or window is opened and closed to allow an alterable radiative view to space.

Application of Micro-Electro-Mechanical Sensors Contactless NDT of Concrete Structures.

PubMed

Ham, Suyun; Popovics, John S

2015-04-17

The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ultrasonic surface wave, and multi-channel analysis of surface waves (MASW), is demonstrated. In each test application, the performance of MEMS is compared with conventional contactless and contact sensing technology. Favorable performance of the MEMS sensors demonstrates the potential of the technology for applied contactless NDT efforts. To illustrate the utility of air-coupled MEMS sensors for concrete NDT, as compared with conventional sensor technology.

76 FR 1412 - Notice of Intent To Grant Partially Exclusive Patent License; Lumedyne Technologies, Inc.

Federal Register 2010, 2011, 2012, 2013, 2014

2011-01-10

...) described in Navy Case No. 98745--Method of Fabricating a Micro-Electro-Mechanical Apparatus for Generating Power Responsive to Mechanical Vibration//Navy Case No. 99735-- Apparatus for Generating Power...

Surface characteristics and biocompatibility of cranioplasty titanium implants following different surface treatments.

PubMed

Hatamleh, Muhanad M; Wu, Xiaohong; Alnazzawi, Ahmad; Watson, Jason; Watts, David

2018-04-01

Surface and mechanical properties of titanium alloys are integral for their use in restoring bone defects of skull and face regions. These properties are affected by the method of constructing and surface treatment of the titanium implant. This study aimed to investigate the effects of titanium finishing protocols on the surface morphology, hardness and biocompatibility of TiAl6V4. Square shaped TiAl6V4 specimens (ASTM F68) (10×10×0.5mm) were divided into seven groups of different surface treatments (n=10). The treatments included mechanical polishing, sandblasting with AL 2 O 3 (50μm), immersion in different acids, and/or electro-chemical anodization. Weight loss %; 3D micro-roughness; Knoop micro-hardness, and osteoblast cell attachment and proliferation (after 3 days) were determined for each specimen. Data was analysed using one way ANOVA and Dunett T3 post-hoc tests, and t-test (p<0.05). Weight loss % was in the range of 1.70-5.60 as mechanical polishing produced the highest weight loss, followed by sandblasting, and combined protocol of mechanical polishing and acid treatment (p<0.05). Micro-roughness values (μm) were in the range of 2.81-16.68. It was the highest for control specimens (p<0.05), and smoothest surfaces after combined mechanical polishing and acid treatment; or after electro-chemical treatment (p<0.05). Micro-hardness values (MPa) ranged 170.90-442.15 as sandblasting with/without acid treatment caused statically significantly the highest values (p<0.05) while control and mechanically polished specimens had the lowest values (p<0.05). All treatments produced equally biocompatible surfaces (p>0.05) after 1h or 3 days. Furthermore, osteoblast cell proliferation statistically significantly increased after 3days among each surface treatment (p<0.05). Different finishing treatments have variable effect on cranioplasty titanium surface loss, micro-roughness and micro-hardness but constant improved biocompatibility effect. Electro-chemical treatment caused less material loss and produced biocompatible smoothest surface of comparable hardness; hence it can be suitable for cranioplasty titanium surface finishing. Copyright © 2018 The Academy of Dental Materials. Published by Elsevier Ltd. All rights reserved.

3D sensors and micro-fabricated detector systems

NASA Astrophysics Data System (ADS)

Da Vià, Cinzia

2014-11-01

Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.

Advanced electro-mechanical micro-shutters for thermal infrared night vision imaging and targeting systems

NASA Astrophysics Data System (ADS)

Durfee, David; Johnson, Walter; McLeod, Scott

2007-04-01

Un-cooled microbolometer sensors used in modern infrared night vision systems such as driver vehicle enhancement (DVE) or thermal weapons sights (TWS) require a mechanical shutter. Although much consideration is given to the performance requirements of the sensor, supporting electronic components and imaging optics, the shutter technology required to survive in combat is typically the last consideration in the system design. Electro-mechanical shutters used in military IR applications must be reliable in temperature extremes from a low temperature of -40°C to a high temperature of +70°C. They must be extremely light weight while having the ability to withstand the high vibration and shock forces associated with systems mounted in military combat vehicles, weapon telescopic sights, or downed unmanned aerial vehicles (UAV). Electro-mechanical shutters must have minimal power consumption and contain circuitry integrated into the shutter to manage battery power while simultaneously adapting to changes in electrical component operating parameters caused by extreme temperature variations. The technology required to produce a miniature electro-mechanical shutter capable of fitting into a rifle scope with these capabilities requires innovations in mechanical design, material science, and electronics. This paper describes a new, miniature electro-mechanical shutter technology with integrated power management electronics designed for extreme service infra-red night vision systems.

Electro-mechanical probe positioning system for large volume plasma device

NASA Astrophysics Data System (ADS)

Sanyasi, A. K.; Sugandhi, R.; Srivastava, P. K.; Srivastav, Prabhakar; Awasthi, L. M.

2018-05-01

An automated electro-mechanical system for the positioning of plasma diagnostics has been designed and implemented in a Large Volume Plasma Device (LVPD). The system consists of 12 electro-mechanical assemblies, which are orchestrated using the Modbus communication protocol on 4-wire RS485 communications to meet the experimental requirements. Each assembly has a lead screw-based mechanical structure, Wilson feed-through-based vacuum interface, bipolar stepper motor, micro-controller-based stepper drive, and optical encoder for online positioning correction of probes. The novelty of the system lies in the orchestration of multiple drives on a single interface, fabrication and installation of the system for a large experimental device like the LVPD, in-house developed software, and adopted architectural practices. The paper discusses the design, description of hardware and software interfaces, and performance results in LVPD.

Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems

DOE Office of Scientific and Technical Information (OSTI.GOV)

Amiot, Fabien; Roger, Jean Paul

2006-10-20

We propose to use a Nomarski imaging interferometer to measure the out-of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented,thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximatelymore » 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification.« less

Diffusion Bonding of Silicon Carbide for a Micro-Electro-Mechanical Systems Lean Direct Injector

NASA Technical Reports Server (NTRS)

Halbig, Michael C.; Singh, Mrityunjay; Shpargel, Tarah P.; Kiser, James D.

2006-01-01

Robust approaches for joining silicon carbide (SiC) to silicon carbide sub-elements have been developed for a micro-electro-mechanical systems lean direct injector (MEMS LDI) application. The objective is to join SiC sub-elements to form a leak-free injector that has complex internal passages for the flow and mixing of fuel and air. Previous bonding technology relied upon silicate glass interlayers that were not uniform or leak free. In a newly developed joining approach, titanium foils and physically vapor deposited titanium coatings were used to form diffusion bonds between SiC materials during hot pressing. Microscopy results show the formation of well adhered diffusion bonds. Initial tests show that the bond strength is much higher than required for the component system. Benefits of the joining technology are fabrication of leak free joints with high temperature and mechanical capability.

Estimation of tool wear compensation during micro-electro-discharge machining of silicon using process simulation

NASA Astrophysics Data System (ADS)

Muralidhara, .; Vasa, Nilesh J.; Singaperumal, M.

2010-02-01

A micro-electro-discharge machine (Micro EDM) was developed incorporating a piezoactuated direct drive tool feed mechanism for micromachining of Silicon using a copper tool. Tool and workpiece materials are removed during Micro EDM process which demand for a tool wear compensation technique to reach the specified depth of machining on the workpiece. An in-situ axial tool wear and machining depth measurement system is developed to investigate axial wear ratio variations with machining depth. Stepwise micromachining experiments on silicon wafer were performed to investigate the variations in the silicon removal and tool wear depths with increase in tool feed. Based on these experimental data, a tool wear compensation method is proposed to reach the desired depth of micromachining on silicon using copper tool. Micromachining experiments are performed with the proposed tool wear compensation method and a maximum workpiece machining depth variation of 6% was observed.

Large-area multiplexed sensing using MEMS and fiber optics

NASA Astrophysics Data System (ADS)

Miller, Michael B.; Clark, Richard L., Jr.; Bell, Clifton R.; Russler, Patrick M.

2000-06-01

Micro-electro-mechanical (MEMS) technology offers the ability to implement local and independent sensing and actuation functions through the coordinated response of discrete micro-electro-mechanical 'basis function' elements. The small size of micromechanical components coupled with the ability to reduce costs using volume manufacturing techniques opens up significant potential not only in military applications such as flight and engine monitoring and control, but in autonomous vehicle control, smart munitions, airborne reconnaissance, LADAR, missile guidance, and even in intelligent transportation systems and automotive guidance applications. In this program, Luna Innovations is developing a flexible, programmable interface which can be integrated direction with different types of MEMS sensors, and then used to multiplex many sensors ona single optical fiber to provide a unique combination of functions that will allow larger quantities of sensory input with better resolution than ever before possible.

Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

NASA Astrophysics Data System (ADS)

Tong, Hao; Li, Yong; Zhang, Long

2018-02-01

Array micro cavities are useful in many fields including in micro molds, optical devices, biochips and so on. Array servo scanning micro electro discharge machining (EDM), using array micro electrodes with simple cross-sectional shape, has the advantage of machining complex 3D micro cavities in batches. In this paper, the machining errors caused by offline-fabricated array micro electrodes are analyzed in particular, and then a machining process of array servo scanning micro EDM is proposed by using on-machine fabricated array micro electrodes. The array micro electrodes are fabricated on-machine by combined procedures including wire electro discharge grinding, array reverse copying and electrode end trimming. Nine-array tool electrodes with Φ80 µm diameter and 600 µm length are obtained. Furthermore, the proposed process is verified by several machining experiments for achieving nine-array hexagonal micro cavities with top side length of 300 µm, bottom side length of 150 µm, and depth of 112 µm or 120 µm. In the experiments, a chip hump accumulates on the electrode tips like the built-up edge in mechanical machining under the conditions of brass workpieces, copper electrodes and the dielectric of deionized water. The accumulated hump can be avoided by replacing the water dielectric by an oil dielectric.

High-Performance electronics at ultra-low power consumption for space applications: From superconductor to nanoscale semiconductor technology

NASA Technical Reports Server (NTRS)

Duncan, Robert V.; Simmons, Jerry; Kupferman, Stuart; McWhorter, Paul; Dunlap, David; Kovanis, V.

1995-01-01

A detailed review of Sandia's work in ultralow power dissipation electronics for space flight applications, including superconductive electronics, new advances in quantum well structures, and ultra-high purity 3-5 materials, and recent advances in micro-electro-optical-mechanical systems (MEMS) is presented. The superconductive electronics and micromechanical devices are well suited for application in micro-robotics, micro-rocket engines, and advanced sensors.

Electro-mechanical properties of hydrogel composites with micro- and nano-cellulose fillers

NASA Astrophysics Data System (ADS)

N, Mohamed Shahid U.; Deshpande, Abhijit P.; Lakshmana Rao, C.

2015-09-01

Stimuli responsive cross-linked hydrogels are of great interest for applications in diverse fields such as sensors and biomaterials. In this study, we investigate polymer composites filled with cellulose fillers. The celluloses used in making the composites were a microcrystalline cellulose of commercial grade and cellulose nano-whiskers obtained through acid hydrolysis of microcrystalline cellulose. The filler concentration was varied and corresponding physical, mechanical and electro-mechanical characterization was carried out. The electro-mechanical properties were determined using a quasi-static method. The fillers not only enhance the mechanical properties of the composite by providing better reinforcement but also provide a quantitative electric potential in the composite. The measurements reveal that the polymer composites prepared from two different cellulose fillers possess a quantitative electric potential which can be utilized in biomedical applications. It is argued that the mechanism behind the quantitative electric potential in the composites is due to streaming potentials arising due to electrical double layer formation.

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

PubMed Central

Chen, Jiawen; Li, Jianhua; Li, Yiyuan; Chen, Yulong

2018-01-01

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. PMID:29494477

16 CFR 1610.5 - Test apparatus and materials.

Code of Federal Regulations, 2012 CFR

2012-01-01

... electronic circuits, in addition to miscellaneous custom made cams and rods, shock absorbing linkages, and... burn time to 0.1 second. An electronic or mechanical timer can be used to record the burn time, and electro-mechanical devices (i.e., servo-motors, solenoids, micro-switches, and electronic circuits, in...

16 CFR 1610.5 - Test apparatus and materials.

Code of Federal Regulations, 2014 CFR

2014-01-01

... electronic circuits, in addition to miscellaneous custom made cams and rods, shock absorbing linkages, and... burn time to 0.1 second. An electronic or mechanical timer can be used to record the burn time, and electro-mechanical devices (i.e., servo-motors, solenoids, micro-switches, and electronic circuits, in...

16 CFR § 1610.5 - Test apparatus and materials.

Code of Federal Regulations, 2013 CFR

2013-01-01

... electronic circuits, in addition to miscellaneous custom made cams and rods, shock absorbing linkages, and... burn time to 0.1 second. An electronic or mechanical timer can be used to record the burn time, and electro-mechanical devices (i.e., servo-motors, solenoids, micro-switches, and electronic circuits, in...

Enabling Decisive Strategic Maneuver for the Army Beyond 2010

DTIC Science & Technology

1999-08-01

System and a small Advanced Fire Support System ( AFSS ). In the long run, it might be better to have several vehicles share an AFSS . These are...18 tons M-113APC 9 tons C’OTM 4 tons Flyer w/5 ton AFSS 10 tons Flyer, 5 ton resupply 10 tons Robotic rotorcraft Self ferry All systems were...Task Force Man-portable Air Defense System Manpower and Personnel Integration Micro- Autonomous Vehicles Micro-Electro-Mechanics Micro Electric

Micro-electro-mechanical systems phosphoric acid fuel cell

DOEpatents

Sopchak, David A [Livermore, CA; Morse, Jeffrey D [Martinez, CA; Upadhye, Ravindra S [Pleasanton, CA; Kotovsky, Jack [Oakland, CA; Graff, Robert T [Modesto, CA

2010-08-17

A phosphoric acid fuel cell system comprising a porous electrolyte support, a phosphoric acid electrolyte in the porous electrolyte support, a cathode electrode contacting the phosphoric acid electrolyte, and an anode electrode contacting the phosphoric acid electrolyte.

Micro-electro-mechanical systems phosphoric acid fuel cell

DOEpatents

Sopchak, David A.; Morse, Jeffrey D.; Upadhye, Ravindra S.; Kotovsky, Jack; Graff, Robert T.

2010-12-21

A phosphoric acid fuel cell system comprising a porous electrolyte support, a phosphoric acid electrolyte in the porous electrolyte support, a cathode electrode contacting the phosphoric acid electrolyte, and an anode electrode contacting the phosphoric acid electrolyte.

Observation of creep behavior of cellulose electro-active paper (EAPap) actuator

NASA Astrophysics Data System (ADS)

Kim, Joo-Hyung; Lee, Sang-Woo; Yun, Gyu-Young; Yang, Chulho; Kim, Heung Soo; Kim, Jaehwan

2009-03-01

Understanding of creep effects on actuating mechanisms is important to precisely figure out the behavior of material. Creep behaviors of cellulose based Electro-Active Paper (EAPap) were studied under different constant loading conditions. We found the structural modification of microfibrils in EAPap after creep test. Structural differences of as-prepared and after creep tested samples were compared by SEM measurements. From the measured creep behaviors by different loading conditions, two different regions of induced strain and current were clearly observed as the measurement time increased. It is consider that local defects may occur and becomes micro-dimple or micro-crack formations in lower load cases as localized deformation proceeds, while the shrinkage of diameter of elongated fibers was observed only at the high level of loading. Therefore, cellulose nanofibers may play a role to be against the creep load and prevent the localized structural deformations. The results provide useful creep behavior and mechanism to understand the mechanical behavior of thin visco-elastic EAPap actuator.

Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

NASA Astrophysics Data System (ADS)

Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

2012-06-01

In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

Multiple internal seal right micro-electro-mechanical system vacuum package

NASA Technical Reports Server (NTRS)

Shcheglov, Kirill V. (Inventor); Wiberg, Dean V. (Inventor); Hayworth, Ken J. (Inventor); Yee, Karl Y. (Inventor); Bae, Youngsam (Inventor); Challoner, A. Dorian (Inventor); Peay, Chris S. (Inventor)

2007-01-01

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

MEMS-Based Communications Systems for Space-Based Applications

NASA Technical Reports Server (NTRS)

DeLosSantos, Hector J.; Brunner, Robert A.; Lam, Juan F.; Hackett, Le Roy H.; Lohr, Ross F., Jr.; Larson, Lawrence E.; Loo, Robert Y.; Matloubian, Mehran; Tangonan, Gregory L.

1995-01-01

As user demand for higher capacity and flexibility in communications satellites increases, new ways to cope with the inherent limitations posed by the prohibitive mass and power consumption, needed to satisfy those requirements, are under investigation. Recent studies suggest that while new satellite architectures are necessary to enable multi-user, multi-data rate, multi-location satellite links, these new architectures will inevitably increase power consumption, and in turn, spacecraft mass, to such an extent that their successful implementation will demand novel lightweight/low power hardware approaches. In this paper, following a brief introduction to the fundamentals of communications satellites, we address the impact of micro-electro-mechanical systems (MEMS) technology, in particular micro-electro-mechanical (MEM) switches to mitigate the above mentioned problems and show that low-loss/wide bandwidth MEM switches will go a long way towards enabling higher capacity and flexibility space-based communications systems.

Multiple internal seal ring micro-electro-mechanical system vacuum packaging method

NASA Technical Reports Server (NTRS)

Hayworth, Ken J. (Inventor); Yee, Karl Y. (Inventor); Shcheglov, Kirill V. (Inventor); Bae, Youngsam (Inventor); Wiberg, Dean V. (Inventor); Challoner, A. Dorian (Inventor); Peay, Chris S. (Inventor)

2008-01-01

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

A comparative study of MOEM pressure sensors using MZI, DC, and racetrack resonator IO structures

NASA Astrophysics Data System (ADS)

Selvarajan, A.; Pattnaik, Prasant Kumar; Badrinarayana, T.; Srinivas, T.

2006-03-01

In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due to their attraction in terms of miniaturization, batch fabrication and ease of integration with the required electronics circuitry. Micro-opto-electro-mechanical (MOEM) devices and systems, based on the principles of integrated optics and micromachining technology on silicon have immense potential for sensor applications. Employing optical techniques have important advantages such as functionality, large bandwidth and higher sensitivity. Pressure sensing is currently the most lucrative market for solid-state micro sensors. Pressure sensing using micromachined structures utilize the changes induced in either the resistive or capacitive properties of the electro-mechanical structure by the impressed pressure. Integrated optical pressure sensors can utilize the changes to the amplitude, phase, refractive index profile, optical path length, or polarization of the lightwave by the external pressure. In this paper we compare the performance characteristics of three types of MOEM pressure sensors based on Mach-Zehnder Interferometer (MZI), Directional Coupler (DC) and racetrack resonator (RR) integrated optical geometries. The first two configurations measure the pressure changes through a change in optical intensity while the third one measures the same in terms of frequency or wavelength change. The analysis of each sensors has been carried out in terms of mechanical and optical models and their interrelationship through optomechanical coupling. For a typical diaphragm of size 2mm × 1mm × 20 μm, normalized pressure sensitivity of 18.35 μW/mW/kPa, 29.37 μW/mW/kPa and 2.26 pm/kPa in case of MZI, DC and RR devices have been obtained respectively. The noise performance of these devices are also presented.

Micro electro-mechanical heater

DOEpatents

Oh, Yunje; Asif, Syed Amanulla Syed; Cyrankowski, Edward; Warren, Oden Lee

2016-04-19

A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.

Micro electro-mechanical heater

DOEpatents

Oh, Yunje; Asif, Syed Amanulla Syed; Cyrankowski, Edward; Warren, Oden Lee

2017-09-12

A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.

Ytterbium-doped fibre laser Q-switched by a cantilever-type micro-mirror.

PubMed

Fabert, Marc; Desfarges-Berthelemot, Agnès; Kermène, Vincent; Crunteanu, Aurelian; Bouyge, David; Blondy, Pierre

2008-12-22

We present an Ytterbium fibre laser operating in the Q-switch regime by using a Micro- Opto- Electro- Mechanical System (MOEMS) of novel design. The cantilever-type micro-mirror is designed to generate short laser pulses with duration between 20 ns and 100 ns at repetition rates ranging from a few kilohertz up to 800 kHz. The bent profile of this new type of MOEMS ensures a high modulation rate of the laser cavity losses while keeping a high actuating frequency.

Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach.

PubMed

Mariani, Stefano; Ghisi, Aldo; Corigliano, Alberto; Zerbini, Sarah

2009-01-01

Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation of stress waves inside the package; (ii) the dynamics of the whole MEMS; (iii) the spreading of micro-cracking in the failing part(s) of the sensor. Through Monte Carlo simulations, some effects of polysilicon micro-structure on the failure mode are elucidated.

Infusion of Emerging Technologies and New Teaching Methods into the Mechanical Engineering Curriculum at the City College of New York

ERIC Educational Resources Information Center

Delale, Feridun; Liaw, Benjamin M.; Jiji, Latif M.; Voiculescu, Ioana; Yu, Honghui

2011-01-01

From October 2003 to April 2008 a systemic reform of the Mechanical Engineering program at The City College of New York was undertaken with the goal of incorporating emerging technologies (such as nanotechnology, biotechnology, Micro-Electro-Mechanical Systems (MEMS), intelligent systems) and new teaching methodologies (such as project based…

MEMS based digital transform spectrometers

NASA Astrophysics Data System (ADS)

Geller, Yariv; Ramani, Mouli

2005-09-01

Earlier this year, a new breed of Spectrometers based on Micro-Electro-Mechanical-System (MEMS) engines has been introduced to the commercial market. The use of these engines combined with transform mathematics, produces powerful spectrometers at unprecedented low cost in various spectral regions.

Air-Microfluidics: Creating Small, Low-cost, Portable Air Quality Sensors

EPA Science Inventory

Air-microfluidics shows great promise in dramatically reducing the size, cost, and power requirements of future air quality sensors without compromising their accuracy. Microfabrication provides a suite of relatively new tools for the development of micro electro mechanical syste...

Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications

NASA Technical Reports Server (NTRS)

1995-01-01

The recent evolution of microelectronic technologies coupled with the growth of micro-electro-mechanical systems (MEMS) has had significant impact in the commercial sector. The focus of this conference was to anticipate and extend the incorporation of nano-electronics and MEMS into application specific integrated microinstruments (ASIM's) in space systems. Presentations ranged from mission application of nano-satellites to silicon micromachining for photonic applications.

A Novel MicroElectroMechanical System (MEMS) Device for Passive Sampling of Hydrophobic Compounds

DTIC Science & Technology

2011-05-01

bioavailability  Samplers are removed, extracted for CoC, analyzed ▬ For organics: solid phase micro extraction ( SPME ) fibers, semi- permeable membrane...devices (SPMD), polyoxymethylene (POM) ▬ For metals: diffuse gradients in thin films (DGT) SPME fiber ESTCP project, Reible and Lotufo Applications to...Predict Bioaccumulation You et al. 2006, EST, 40: 6348 SPME concentrations were predictive of tissue concentrations of PCBs in field-contaminated

Design and Fabrication of Micro-Electro-Mechanical Structures for Tunable Micro-Optical Devices

DTIC Science & Technology

2002-03-01

purposes. Figure 2.6 shows the resulting Voltage vs. displacement curve for a 150 µm × 150 µm piston micromirror with four 150 µm flexures, and a 2 µm...2-6 2.3.2 Piston Micromirrors . . . . . . . . . . . . . . . . . . 2-7 2.4 VCSEL Design...Schematic view of basic electrostatic piston micromirror [4]. . . . . 2-7 2.5. Deflection of a flexure beam with a single fixed end [22]. . . . . . . 2

Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures

NASA Technical Reports Server (NTRS)

Kuhn, J. L.; Dutta, S. B.; Greenhouse, M. A.; Mott, D. B.

2000-01-01

Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for electrostatic pressure arid mechanical restoring torque are used to predict the pull-in and release voltages at room temperature. Subsequently, a detailed mechanical finite element model is developed to predict stresses and vertical beam deflection induced by the electrostatic and thermal loads. An incremental and iterative solution method is used in conjunction with the nonlinear finite element model and closed form electrostatic equations to solve. the coupled electro-thermo-mechanical problem. The simulation results are compared with experimental measurements at room temperature of fabricated micro-mirror devices.

The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

NASA Astrophysics Data System (ADS)

Arutt, Charles N.; Alles, Michael L.; Liao, Wenjun; Gong, Huiqi; Davidson, Jim L.; Schrimpf, Ronald D.; Reed, Robert A.; Weller, Robert A.; Bolotin, Kirill; Nicholl, Ryan; Pham, Thang Toan; Zettl, Alex; Qingyang, Du; Hu, Juejun; Li, Mo; Alphenaar, Bruce W.; Lin, Ji-Tzuoh; Shurva, Pranoy Deb; McNamara, Shamus; Walsh, Kevin M.; X-L Feng, Philip; Hutin, Louis; Ernst, Thomas; Homeijer, Brian D.; Polcawich, Ronald G.; Proie, Robert M.; Jones, Jacob L.; Glaser, Evan R.; Cress, Cory D.; Bassiri-Gharb, Nazanin

2017-01-01

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.

Atomic force microscope based on vertical silicon probes

NASA Astrophysics Data System (ADS)

Walter, Benjamin; Mairiaux, Estelle; Faucher, Marc

2017-06-01

A family of silicon micro-sensors for Atomic Force Microscope (AFM) is presented that allows to operate with integrated transducers from medium to high frequencies together with moderate stiffness constants. The sensors are based on Micro-Electro-Mechanical-Systems technology. The vertical design specifically enables a long tip to oscillate perpendicularly to the surface to be imaged. The tip is part of a resonator including quasi-flexural composite beams, and symmetrical transducers that can be used as piezoresistive detector and/or electro-thermal actuator. Two vertical probes (Vprobes) were operated up to 4.3 MHz with stiffness constants 150 N/m to 500 N/m and the capability to oscillate from 10 pm to 90 nm. AFM images of several samples both in amplitude modulation (tapping-mode) and in frequency modulation were obtained.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Luo, Shaohua; School of Automation, Chongqing University, Chongqing 400044; Sun, Quanping

This paper addresses chaos control of the micro-electro- mechanical resonator by using adaptive dynamic surface technology with extended state observer. To reveal the mechanism of the micro- electro-mechanical resonator, the phase diagrams and corresponding time histories are given to research the nonlinear dynamics and chaotic behavior, and Homoclinic and heteroclinic chaos which relate closely with the appearance of chaos are presented based on the potential function. To eliminate the effect of chaos, an adaptive dynamic surface control scheme with extended state observer is designed to convert random motion into regular motion without precise system model parameters and measured variables. Puttingmore » tracking differentiator into chaos controller solves the ‘explosion of complexity’ of backstepping and poor precision of the first-order filters. Meanwhile, to obtain high performance, a neural network with adaptive law is employed to approximate unknown nonlinear function in the process of controller design. The boundedness of all the signals of the closed-loop system is proved in theoretical analysis. Finally, numerical simulations are executed and extensive results illustrate effectiveness and robustness of the proposed scheme.« less

MOEMs devices for future astronomical instrumentation in space

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Liotard, Arnaud; Lanzoni, Patrick; ElHadi, Kacem; Waldis, Severin; Noell, Wilfried; de Rooij, Nico; Conedera, Veronique; Fabre, Norbert; Muratet, Sylvaine; Camon, Henri

2017-11-01

Based on the micro-electronics fabrication process, Micro-Opto-Electro-Mechanical Systems (MOEMS) are under study in order to be integrated in next-generation astronomical instruments for ground-based and space telescopes. Their main advantages are their compactness, scalability, specific task customization using elementary building blocks, and remote control. At Laboratoire d'Astrophysique de Marseille, we are engaged since several years in the design, realization and characterization of programmable slit masks for multi-object spectroscopy and micro-deformable mirrors for wavefront correction. First prototypes have been developed and show results matching with the requirements.

MOEMs, key optical components for future astronomical instrumentation in space

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Dohlen, Kjetil; Burgarella, Denis; Ferrari, Marc; Buat, Veronique

2017-11-01

Based on the micro-electronics fabrication process, MicroOpto-Electro-Mechanical Systems (MOEMS) are under study, in order to be integrated in next-generation astronomical instruments and telescopes, especially for space missions. The main advantages of micro-optical components are their compactness, scalability, specific task customization using elementary building blocks, and they allows remote control. As these systems are easily replicable, the price of the components is decreasing dramatically when their number is increasing. The two major applications of MOEMS are Multi-Object Spectroscopy masks and Deformable Mirror systems.

Special Technology Area Review on Micro-Opto-Electro-Mechanical-Systems (MOEMS)

DTIC Science & Technology

1997-12-01

Optical Interference in Night Vision Systems "* DMD Assisted Intelligent Manufacturing of ................................................... SRI...CONCEPT ......................................... p. 8 FIGURE 3(a): DMD LIGHT SWITCHES...p. 9 FIGURE 3(b): SEM PHOTOMICROGRAPHS OF DMD CHIPS ........................................ p. 9 FIGURE 4: MULTI-USER MEMS PROJECTS (MUMPS

Single Molecular Detection via Micro-Scale Polymeric Opto-Electro-Mechanical Systems

DTIC Science & Technology

2005-06-01

lenses, multilayer chips with micromirror sidewalls for TIR excitation and polymer-based microactuators for sample handling. 15. NUMBER OF PAGES...Axis Gimaled Micromirror ..............................................................18 3.1.1.3.2 Concept of the Backside Island...Gimbaled 2-D Micromirror .............................................................................................................65 4.2.2

Microsystem technology as a road from macro to nanoworld.

PubMed

Grabiec, Piotr; Domański, Krzysztof; Janus, Paweł; Zaborowski, Michał; Jaroszewicz, Bogdan

2005-04-01

Tremendous progress of microelectronic technology observed within last 40 years is closely related to even more remarkable progress of technological tools. It is important to note however, that these new tools may be used for fabrication of diverse multifunctional structures as well. Such devices, called MEMS (Micro-Electro-Mechanical-System) and MOEMS (Micro-Electro-Opto-Mechanical-System) integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application, with most interesting and prospective being bio-medical investigations. Development of these applications requires however cooperation of multidisciplinary team of specialists, covering broad range of physics, (bio) chemistry and electronics, not mentioning medical doctors and other medical specialists. Thus, dissemination, of knowledge about existing processing capabilities is of key importance. In this paper, examples of various applications of microelectronic technology for fabrication of Microsystems which may be used for medicine and chemistry, will be presented. Besides, information concerning a design and technology potential available in poland and new, emerging opportunities will be given.

Development of High Precision Metal Micro-Electro-Mechanical-Systems Column for Portable Surface Acoustic Wave Gas Chromatograph

NASA Astrophysics Data System (ADS)

Iwaya, Takamitsu; Akao, Shingo; Sakamoto, Toshihiro; Tsuji, Toshihiro; Nakaso, Noritaka; Yamanaka, Kazushi

2012-07-01

In the field of environmental measurement and security, a portable gas chromatograph (GC) is required for the on-site analysis of multiple hazardous gases. Although the gas separation column has been downsized using micro-electro-mechanical-systems (MEMS) technology, an MEMS column made of silicon and glass still does not have sufficient robustness and a sufficiently low fabrication cost for a portable GC. In this study, we fabricated a robust and inexpensive high-precision metal MEMS column by combining diffusion-bonded etched stainless-steel plates with alignment evaluation using acoustic microscopy. The separation performance was evaluated using a desktop GC with a flame ionization detector and we achieved the high separation performance comparable to the best silicon MEMS column fabricated using a dynamic coating method. As an application, we fabricated a palm-size surface acoustic wave (SAW) GC combining this column with a ball SAW sensor and succeeded in separating and detecting a mixture of volatile organic compounds.

Design, Fabrication and Characterization of Micro Opto-Electro-Mechanical Systems.

DTIC Science & Technology

1995-12-01

interference problems (see Fig. 3-6). Improvements in the lithography of the MCNC process would allow for grating spaces of less than 2 gm and therefore...A micro-spectrometer has been fabricated using LIGA, an acronym for lithography , electroforming, and micromolding (the acronym came from the German...location for test samples and an adjustable mirror. The beams are brought back together to form an interference pattern. At an observation screen the

Electro-thermo-mechanical nonlinear nonlocal vibration and instability of embedded micro-tube reinforced by BNNT, conveying fluid

NASA Astrophysics Data System (ADS)

Ghorbanpour Arani, A.; Shajari, A. R.; Amir, S.; Loghman, A.

2012-08-01

Nonlinear vibration and stability of a smart composite micro-tube made of Poly-vinylidene fluoride (PVDF) reinforced by Boron-Nitride nanotubes (BNNTs) embedded in an elastic medium under electro-thermal loadings is investigated. The BNNTs are considered to be long straight fibers and the composite used in this study is in the category of piezoelectric fiber reinforced composites (PEFRC). The micro-tube is conveying a fully developed isentropic, incompressible and irrotational fluid flow. The smart micro-tube is modeled as a thin shell based on the nonlinear Donnell's shell theory. Effects of mean flow velocity, fluid viscosity, elastic medium modulus, temperature change, imposed electric potential, small scale, aspect ratio, volume percent and orientation angle of the BNNTs on the vibration behavior of the micro-tube are taken into account. The results indicate that increasing mean flow velocity considerably increases the nonlinearity effects so that small scale and temperature change effects become negligible. It has also been found that stability of the system is strongly dependent on the imposed electric potential and the volume percent of BNNTs reinforcement. The system studied in this article can be used as sensor and actuator in the sensitive applications.

MOEMS optical delay line for optical coherence tomography

NASA Astrophysics Data System (ADS)

Choudhary, Om P.; Chouksey, S.; Sen, P. K.; Sen, P.; Solanki, J.; Andrews, J. T.

2014-09-01

Micro-Opto-Electro-Mechanical optical coherence tomography, a lab-on-chip for biomedical applications is designed, studied, fabricated and characterized. To fabricate the device standard PolyMUMPS processes is adopted. We report the utilization of electro-optic modulator for a fast scanning optical delay line for time domain optical coherence tomography. Design optimization are performed using Tanner EDA while simulations are performed using COMSOL. The paper summarizes various results and fabrication methodology adopted. The success of the device promises a future hand-held or endoscopic optical coherence tomography for biomedical applications.

MEMS: A new approach to micro-optics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sniegowski, J.J.

1997-12-31

MicroElectroMechanical Systems (MEMS) and their fabrication technologies provide great opportunities for application to micro-optical systems (MOEMS). Implementing MOEMS technology ranges from simple, passive components to complicated, active systems. Here, an overview of polysilicon surface micromachining MEMS combined with optics is presented. Recent advancements to the technology, which may enhance its appeal for micro-optics applications are emphasized. Of all the MEMS fabrication technologies, polysilicon surface micromachining technology has the greatest basis in and leverages the most the infrastructure for silicon integrated circuit fabrication. In that respect, it provides the potential for very large volume, inexpensive production of MOEMS. This paper highlightsmore » polysilicon surface micromachining technology in regards to its capability to provide both passive and active mechanical elements with quality optical elements.« less

Fabrication of polymeric nano-batteries array using anodic aluminum oxide templates.

PubMed

Zhao, Qiang; Cui, Xiaoli; Chen, Ling; Liu, Ling; Sun, Zhenkun; Jiang, Zhiyu

2009-02-01

Rechargeable nano-batteries were fabricated in the array pores of anodic aluminum oxide (AAO) template, combining template method and electrochemical method. The battery consisted of electropolymerized PPy electrode, porous TiO2 separator, and chemically polymerized PAn electrode was fabricated in the array pores of two-step anodizing aluminum oxide (AAO) membrane, based on three-step assembling method. It performs typical electrochemical battery behavior with good charge-discharge ability, and presents a capacity of 25 nAs. AFM results show the hexagonal array of nano-batteries' top side. The nano-battery may be a promising device for the development of Micro-Electro-Mechanical Systems (MEMS), and Nano-Electro-Mechanical Systems (NEMS).

Controlling Casimir force via coherent driving field

NASA Astrophysics Data System (ADS)

Ahmad, Rashid; Abbas, Muqaddar; Ahmad, Iftikhar; Qamar, Sajid

2016-04-01

A four level atom-field configuration is used to investigate the coherent control of Casimir force between two identical plates made up of chiral atomic media and separated by vacuum of width d. The electromagnetic chirality-induced negative refraction is obtained via atomic coherence. The behavior of Casimir force is investigated using Casimir-Lifshitz formula. It is noticed that Casimir force can be switched from repulsive to attractive and vice versa via coherent control of the driving field. This switching feature provides new possibilities of using the repulsive Casimir force in the development of new emerging technologies, such as, micro-electro-mechanical and nano-electro-mechanical systems, i.e., MEMS and NEMS, respectively.

MOEMs-based new functionalities for future instrumentation in space

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Liotard, Arnaud; Viard, Thierry; Costes, Vincent; Hébert, Philippe-Jean; Hinglais, Emmanuel; Villenave, Michel

2017-11-01

Micro-Opto-Electro-Mechanical Systems (MOEMS) could be key components in future generation of space instruments. In Earth Observation, Universe Observation and Planet Exploration, scientific return of the instruments must be optimized in future missions. MOEMS devices are based on the mature micro-electronics technology and in addition to their compactness, scalability, and specific task customization, they could generate new functions not available with current technologies. CNES has initiated a study with LAM and TAS for listing the new functions associated with several types of MEMS (programmable slits, programmable micro-diffraction gratings, micro-deformable mirrors). Instrumental applications are then derived and promising concepts are described.

Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Lin, Chien-Hen; Lo, Yi-Man

2011-01-01

Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance. PMID:22163817

Microfabricated Air-Microfluidic Sensor for Personal Monitoring of Airborne Particulate Matter: Design, Fabrication, and Experimental Results

EPA Science Inventory

We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring P...

75 FR 80800 - Notice of Availability of Government-Owned Inventions; Available for Licensing

Federal Register 2010, 2011, 2012, 2013, 2014

2010-12-23

... made available for licensing by the Department of the Navy. Navy Case No. 83951--Apparatus and System... No. 98721--Static Wireless Data-Glove Apparatus for Gesture Processing and Recognition and... Avoidance Decisions; Navy Case No. 98745--Method of Fabricating A Micro-Electro-Mechanical Apparatus for...

Application of Flexible Micro Temperature Sensor in Oxidative Steam Reforming by a Methanol Micro Reformer

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Shen, Chia-Chieh; Yeh, Chuin-Tih; Chang, Chi-Chung; Lo, Yi-Man

2011-01-01

Advances in fuel cell applications reflect the ability of reformers to produce hydrogen. This work presents a flexible micro temperature sensor that is fabricated based on micro-electro-mechanical systems (MEMS) technology and integrated into a flat micro methanol reformer to observe the conditions inside that reformer. The micro temperature sensor has higher accuracy and sensitivity than a conventionally adopted thermocouple. Despite various micro temperature sensor applications, integrated micro reformers are still relatively new. This work proposes a novel method for integrating micro methanol reformers and micro temperature sensors, subsequently increasing the methanol conversion rate and the hydrogen production rate by varying the fuel supply rate and the water/methanol ratio. Importantly, the proposed micro temperature sensor adequately controls the interior temperature during oxidative steam reforming of methanol (OSRM), with the relevant parameters optimized as well. PMID:22319407

Large scale micro-photometry for high resolution pH-characterization during electro-osmotic pumping and modular micro-swimming

NASA Astrophysics Data System (ADS)

Niu, Ran; Khodorov, Stanislav; Weber, Julian; Reinmüller, Alexander; Palberg, Thomas

2017-11-01

Micro-fluidic pumps as well as artificial micro-swimmers are conveniently realized exploiting phoretic solvent flows based on local gradients of temperature, electrolyte concentration or pH. We here present a facile micro-photometric method for monitoring pH gradients and demonstrate its performance and scope on different experimental situations including an electro-osmotic pump and modular micro-swimmers assembled from ion exchange resin beads and polystyrene colloids. In combination with the present microscope and DSLR camera our method offers a 2 μm spatial resolution at video frame rate over a field of view of 3920 × 2602 μm2. Under optimal conditions we achieve a pH-resolution of 0.05 with about equal contributions from statistical and systematical uncertainties. Our quantitative micro-photometric characterization of pH gradients which develop in time and reach out several mm is anticipated to provide valuable input for reliable modeling and simulations of a large variety of complex flow situations involving pH-gradients including artificial micro-swimmers, microfluidic pumping or even electro-convection.

Magnetic Induction Machines Integrated into Bulk-Micromachined Silicon

DTIC Science & Technology

2006-04-01

Actuator Workshop (Hilton Head 2000), pp. 43–7, Jun. 2000. [5] H. Guckel et al., “A first functional current excited planar rotational magnetic micromotor ...in Proc. IEEE Micro Electro Mechanical Sys- tems (MEMS’93), Feb. 1993, pp. 7–11. [6] , “Planar rotational magnetic micromotors ,” Int. J. Appl... micromotor with fully integrated stator and coils,” J. Micro- electromech. Syst., vol. 2, no. 4, pp. 165–73, Dec. 1993. [8] B. Wagner, M. Kreutzer, and W

On-chip optical transduction scheme for graphene nano-electro-mechanical systems in silicon-photonic platform.

PubMed

Dash, Aneesh; Selvaraja, S K; Naik, A K

2018-02-15

We present a scheme for on-chip optical transduction of strain and displacement of graphene-based nano-electro-mechanical systems (NEMS). A detailed numerical study on the feasibility of three silicon-photonic integrated circuit configurations is presented: the Mach-Zehnder interferometer (MZI), the micro-ring resonator, and the ring-loaded MZI. An index sensing based technique using an MZI loaded with a ring resonator with a moderate Q-factor of 2400 can yield a sensitivity of 28  fm/Hz and 6.5×10 -6 %/Hz for displacement and strain, respectively. Though any phase-sensitive integrated-photonic device could be used for optical transduction, here we show that optimal sensitivity is achievable by combining resonance with phase sensitivity.

On-chip optical transduction scheme for graphene nano-electro-mechanical systems in silicon-photonic platform

NASA Astrophysics Data System (ADS)

Dash, Aneesh; Selvaraja, S. K.; Naik, A. K.

2018-02-01

We present a scheme for on-chip optical transduction of strain and displacement of Graphene-based Nano-Electro-Mechanical Systems (NEMS). A detailed numerical study on the feasibility of three silicon-photonic integrated circuit configurations is presented: Mach-Zehnder Interferometer(MZI), micro-ring resonator and ring-loaded MZI. An index-sensing based technique using a Mach-Zehnder Interferometer loaded with a ring resonator with a moderate Q-factor of 2400 can yield a sensitivity of 28 fm/sqrt(Hz), and 6.5E-6 %/sqrt(Hz) for displacement and strain respectively. Though any phase sensitive integrated photonic device could be used for optical transduction, here we show that optimal sensitivity is achievable by combining resonance with phase sensitivity.

Optical and electrical interfacing technologies for living cell bio-chips.

PubMed

Shacham-Diamand, Y; Belkin, S; Rishpon, J; Elad, T; Melamed, S; Biran, A; Yagur-Kroll, S; Almog, R; Daniel, R; Ben-Yoav, H; Rabner, A; Vernick, S; Elman, N; Popovtzer, R

2010-06-01

Whole-cell bio-chips for functional sensing integrate living cells on miniaturized platforms made by micro-system-technologies (MST). The cells are integrated, deposited or immersed in a media which is in contact with the chip. The cells behavior is monitored via electrical, electrochemical or optical methods. In this paper we describe such whole-cell biochips where the signal is generated due to the genetic response of the cells. The solid-state platform hosts the biological component, i.e. the living cells, and integrates all the required micro-system technologies, i.e. the micro-electronics, micro-electro optics, micro-electro or magneto mechanics and micro-fluidics. The genetic response of the cells expresses proteins that generate: a. light by photo-luminescence or bioluminescence, b. electrochemical signal by interaction with a substrate, or c. change in the cell impedance. The cell response is detected by a front end unit that converts it to current or voltage amplifies and filters it. The resultant signal is analyzed and stored for further processing. In this paper we describe three examples of whole-cell bio chips, photo-luminescent, bioluminescent and electrochemical, which are based on the genetic response of genetically modified E. coli microbes integrated on a micro-fluidics MEMS platform. We describe the chip outline as well as the basic modeling scheme of such sensors. We discuss the highlights and problems of such system, from the point of view of micro-system-technology.

Micro electro-mechanical system piezoelectric cantilever array for a broadband vibration energy harvester.

PubMed

Chun, Inwoo; Lee, Hyun-Woo; Kwon, Kwang-Ho

2014-12-01

Limited energy sources of ubiquitous sensor networks (USNs) such as fuel cells and batteries have grave drawbacks such as the need for replacements and re-charging owing to their short durability and environmental pollution. Energy harvesting which is converting environmental mechanical vibration into electrical energy has been researched with some piezoelectric materials and various cantilever designs to increase the efficiency of energy-harvesting devices. In this study, we focused on an energy-harvesting cantilever with a broadband vibration frequency. We fabricated a lead zirconate titanate (PZT) cantilever array with various Si proof masses on small beams (5.5 mm x 0.5 mm x 0.5 mm). We obtained broadband resonant frequencies ranging between 127 Hz and 136 Hz using a micro electro-mechanical system (MEMS) process. In order to obtain broadband resonant characteristics, the cantilever array was comprised of six cantilevers with different resonant frequencies. We obtained an output power of about 2.461 μW at an acceleration of 0.23 g and a resistance of 4 kΩ. The measured bandwidth of the resonant frequency was approximately 9 Hz (127-136 Hz), which is about six times wider than the bandwidth of a single cantilever.

Advanced Exploration Technologies: Micro and Nano Technologies Enabling Space Missions in the 21st Century

NASA Technical Reports Server (NTRS)

Krabach, Timothy

1998-01-01

Some of the many new and advanced exploration technologies which will enable space missions in the 21st century and specifically the Manned Mars Mission are explored in this presentation. Some of these are the system on a chip, the Computed-Tomography imaging Spectrometer, the digital camera on a chip, and other Micro Electro Mechanical Systems (MEMS) technology for space. Some of these MEMS are the silicon micromachined microgyroscope, a subliming solid micro-thruster, a micro-ion thruster, a silicon seismometer, a dewpoint microhygrometer, a micro laser doppler anemometer, and tunable diode laser (TDL) sensors. The advanced technology insertion is critical for NASA to decrease mass, volume, power and mission costs, and increase functionality, science potential and robustness.

In Situ Monitoring of Temperature inside Lithium-Ion Batteries by Flexible Micro Temperature Sensors

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Tang, Ming-Shao; Chen, Pei-Chi

2011-01-01

Lithium-ion secondary batteries are commonly used in electric vehicles, smart phones, personal digital assistants (PDA), notebooks and electric cars. These lithium-ion secondary batteries must charge and discharge rapidly, causing the interior temperature to rise quickly, raising a safety issue. Over-charging results in an unstable voltage and current, causing potential safety problems, such as thermal runaways and explosions. Thus, a micro flexible temperature sensor for the in in-situ monitoring of temperature inside a lithium-ion secondary battery must be developed. In this work, flexible micro temperature sensors were integrated into a lithium-ion secondary battery using the micro-electro-mechanical systems (MEMS) process for monitoring temperature in situ. PMID:22163735

In situ monitoring of temperature inside lithium-ion batteries by flexible micro temperature sensors.

PubMed

Lee, Chi-Yuan; Lee, Shuo-Jen; Tang, Ming-Shao; Chen, Pei-Chi

2011-01-01

Lithium-ion secondary batteries are commonly used in electric vehicles, smart phones, personal digital assistants (PDA), notebooks and electric cars. These lithium-ion secondary batteries must charge and discharge rapidly, causing the interior temperature to rise quickly, raising a safety issue. Over-charging results in an unstable voltage and current, causing potential safety problems, such as thermal runaways and explosions. Thus, a micro flexible temperature sensor for the in in-situ monitoring of temperature inside a lithium-ion secondary battery must be developed. In this work, flexible micro temperature sensors were integrated into a lithium-ion secondary battery using the micro-electro-mechanical systems (MEMS) process for monitoring temperature in situ.

Design, Fabrication, Processing, and Testing of Micro-Electro-Mechanical Chemical Sensors

DTIC Science & Technology

1995-12-01

sensor ...... .......................... 118 71. Resonating bridge parameter curves ...... ......................... 119 72. Low frequency oscillations...131 82. Heater V-I curve .. .. .. .. ... ... ... ... ... ... ... ... ..... 132 83. Frequency response of heated chemoresistor...devices, including devices that may be pre-stressed due to fabrication procedures (i.e. curve out of the plane after being released)? Due to their

How Small Can We Go: Exploring the Limitations and Scaling laws of Air-Microfluidic Particulate Matter Sensors

EPA Science Inventory

Air-microfluidics is a field that has the potential to dramatically reduce the size, cost, and power requirements of future air quality sensors. Microfabrication provides a suite of relatively new tools for the development of micro electro mechanical systems (MEMS) that can be ap...

Mini and micro spectrometers pave the way to on-field advanced analytics

NASA Astrophysics Data System (ADS)

Bouyé, Clémentine; Kolb, Hugo; d'Humières, Benoît.

2016-03-01

First introduced in the 1990's, miniature optical spectrometers were compact, portable devices brought on the market by the desire to move from time-consuming lab-based analyses to on-field and in situ measurements. This goal of getting spectroscopy into the hands of non-specialists is driving current technical and application developments, the ultimate goal being, in a far future, the integration of a spectrometer into a smartphone or any other smart device (tablet, watch, …). In this article, we present the results of our study on the evolution of the compact spectrometers market towards widespread industrial use and consumer applications. Presently, the main market of compact spectrometers remains academic labs. However, they have been adopted on some industrial applications such as optical source characterization (mainly laser and LEDs). In a near future, manufacturers of compact spectrometers target the following industrial applications: agriculture crop monitoring, food process control or pharmaceuticals quality control. Next steps will be to get closer to the consumer market with point-of-care applications such as glucose detection for diabetics, for example. To reach these objectives, technological breakthroughs will be necessary. Recent progresses have already allowed the release of micro-spectrometers. They take advantage of new micro-technologies such as MEMS (MicroElectroMechanical Systems), MOEMS (Micro-Opto-Electro-Mechanical Systems), micro-mirrors arrays to reduce cost and size while allowing good performance and high volume manufacturability. Integrated photonics is being investigated for future developments. It will also require new business models and new market approaches. Indeed, spreading spectroscopy to more industrial and consumer applications will require spectrometers manufacturers to get closer to the end-users and develop application-oriented products.

Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology

NASA Astrophysics Data System (ADS)

Smith, James H.; Rodgers, M. Steven; Sniegowski, Jeffry J.; Miller, Samuel L.; Hetherington, Dale L.; McWhorter, Paul J.; Warren, Mial E.

1998-09-01

We recently reported on the development of a 5-level polysilicon surface micromachine fabrication process consisting of four levels of mechanical poly plus an electrical interconnect layer and its application to complex mechanical systems. This paper describes the application of this technology to create micro-optical systems-on-a-chip. These are demonstration systems, which show that give levels of polysilicon provide greater performance, reliability, and significantly increased functionality. This new technology makes it possible to realize levels of system complexity that have so far only existed on paper, while simultaneously adding to the robustness of many of the individual subassemblies.

Quantitative correlation between the void morphology of niobium-tin wires and their irreversible critical current degradation upon mechanical loading

DOE PAGES

Barth, Christian; Seeber, B.; Rack, A.; ...

2018-04-26

Understanding the critical current performance variation of Nb 3Sn superconducting wires under mechanical loading is a crucial issue for the design of next generation accelerator and fusion magnets. In these applications, the mechanical properties of the conductors may become a limiting factor due to the strong electro-magnetic forces resulting from the combination of large magnets and intense magnetic fields. In particular, the presence of voids in the superconducting filament structure, which are formed during the fabrication and the reaction heat treatment, determines localized stress concentrations and possibly the formation of cracks. In this work, we demonstrate a quantitative correlation betweenmore » the void morphology and the electro-mechanical limits measured on different Bronze route Nb 3Sn wires. Hot Isostatic Pressing (HIP) prior to the reaction heat treatment is utilized to partially eliminate the voids. The wires’ void distributions - with and without HIP treatment - are detected and statistically analyzed using high energy X-ray micro tomography. The stress concentration due to the shape and distribution of the voids as well as their impact on the electro-mechanical properties are determined through finite element method modeling. Lastly, the results are quantitatively correlated with the experimentally determined limits of the irreversible critical current degradation upon mechanical loading.« less

Quantitative correlation between the void morphology of niobium-tin wires and their irreversible critical current degradation upon mechanical loading

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barth, Christian; Seeber, B.; Rack, A.

Understanding the critical current performance variation of Nb 3Sn superconducting wires under mechanical loading is a crucial issue for the design of next generation accelerator and fusion magnets. In these applications, the mechanical properties of the conductors may become a limiting factor due to the strong electro-magnetic forces resulting from the combination of large magnets and intense magnetic fields. In particular, the presence of voids in the superconducting filament structure, which are formed during the fabrication and the reaction heat treatment, determines localized stress concentrations and possibly the formation of cracks. In this work, we demonstrate a quantitative correlation betweenmore » the void morphology and the electro-mechanical limits measured on different Bronze route Nb 3Sn wires. Hot Isostatic Pressing (HIP) prior to the reaction heat treatment is utilized to partially eliminate the voids. The wires’ void distributions - with and without HIP treatment - are detected and statistically analyzed using high energy X-ray micro tomography. The stress concentration due to the shape and distribution of the voids as well as their impact on the electro-mechanical properties are determined through finite element method modeling. Lastly, the results are quantitatively correlated with the experimentally determined limits of the irreversible critical current degradation upon mechanical loading.« less

Quantitative correlation between the void morphology of niobium-tin wires and their irreversible critical current degradation upon mechanical loading.

PubMed

Barth, C; Seeber, B; Rack, A; Calzolaio, C; Zhai, Y; Matera, D; Senatore, C

2018-04-26

Understanding the critical current performance variation of Nb 3 Sn superconducting wires under mechanical loading is a crucial issue for the design of next generation accelerator and fusion magnets. In these applications, the mechanical properties of the conductors may become a limiting factor due to the strong electro-magnetic forces resulting from the combination of large magnets and intense magnetic fields. In particular, the presence of voids in the superconducting filament structure, which are formed during the fabrication and the reaction heat treatment, determines localized stress concentrations and possibly the formation of cracks. In this work, we demonstrate a quantitative correlation between the void morphology and the electro-mechanical limits measured on different Bronze route Nb 3 Sn wires. Hot Isostatic Pressing (HIP) prior to the reaction heat treatment is utilized to partially eliminate the voids. The wires' void distributions - with and without HIP treatment - are detected and statistically analyzed using high energy X-ray micro tomography. The stress concentration due to the shape and distribution of the voids as well as their impact on the electro-mechanical properties are determined through finite element method modeling. Finally, the results are quantitatively correlated with the experimentally determined limits of the irreversible critical current degradation upon mechanical loading.

Electro-osmotic flow of couple stress fluids in a micro-channel propagated by peristalsis

NASA Astrophysics Data System (ADS)

Tripathi, Dharmendra; Yadav, Ashu; Anwar Bég, O.

2017-04-01

A mathematical model is developed for electro-osmotic peristaltic pumping of a non-Newtonian liquid in a deformable micro-channel. Stokes' couple stress fluid model is employed to represent realistic working liquids. The Poisson-Boltzmann equation for electric potential distribution is implemented owing to the presence of an electrical double layer (EDL) in the micro-channel. Using long wavelength, lubrication theory and Debye-Huckel approximations, the linearized transformed dimensionless boundary value problem is solved analytically. The influence of electro-osmotic parameter (inversely proportional to Debye length), maximum electro-osmotic velocity (a function of external applied electrical field) and couple stress parameter on axial velocity, volumetric flow rate, pressure gradient, local wall shear stress and stream function distributions is evaluated in detail with the aid of graphs. The Newtonian fluid case is retrieved as a special case with vanishing couple stress effects. With increasing the couple stress parameter there is a significant increase in the axial pressure gradient whereas the core axial velocity is reduced. An increase in the electro-osmotic parameter both induces flow acceleration in the core region (around the channel centreline) and it also enhances the axial pressure gradient substantially. The study is relevant in the simulation of novel smart bio-inspired space pumps, chromatography and medical micro-scale devices.

Gallium nitride-based micro-opto-electro-mechanical systems

NASA Astrophysics Data System (ADS)

Stonas, Andreas Robert

Gallium Nitride and its associated alloys InGaN and AlGaN have many material properties that are highly desirable for micro-electro-mechanical systems (MEMS), and more specifically micro-opto-electro-mechanical systems (MOEMS). The group III-nitrides are tough, stiff, optically transparent, direct bandgap, chemically inert, highly piezoelectric, and capable of functioning at high temperatures. There is currently no other semiconductor system that possesses all of these properties. Taken together, these attributes make the nitrides prime candidates not only for creating new versions of existing device structures, but also for creating entirely unique devices which combine these properties in novel ways. Unfortunately, their chemical resiliency also makes the group III-nitrides extraordinarily difficult to shape into devices. In particular, until this research, no undercut etch technology existed that could controllably separate a selected part of a MEMS device from its sapphire or silicon carbide substrate. This has effectively prevented GaN-based MEMS from being developed. This dissertation describes how this fabrication obstacle was overcome by a novel etching geometry (bandgap-selective backside-illuminated photoelectochemical (BS-BIPEC) etching) and its resulting morphologies. Several gallium-nitride based MEMS devices were created, actuated, and modelled, including cantilevers and membranes. We describe in particular our pursuit of one of the many novel device elements that is possible only in this material system: a transducer that uses an externally applied strain to dynamically change the optical transition energy of a quantum well. While the device objective of a dynamically tunable quantum well was not achieved, we have demonstrated sufficient progress to believe that such a device will be possible soon. We have observed a shift (5.5meV) of quantum well transition energies in released structures, and we have created structures that can apply large biaxial stresses, which are required to produce significantly larger tuning (up to several hundred meV) in quantum well-based devices.

Multilayer ultra thick resist development for MEMS

NASA Astrophysics Data System (ADS)

Washio, Yasushi; Senzaki, Takahiro; Masuda, Yasuo; Saito, Koji; Obiya, Hiroyuki

2005-05-01

MEMS (Micro-Electro-Mechanical Systems) is achieved through a process technology, called Micro-machining. There are two distinct methods to manufacture a MEMS-product. One method is to form permanent film through photolithography, and the other is to form a non-permanent film resist after photolithography proceeded by etch or plating process. The three-dimensional ultra-fine processing technology based on photolithography, and is assembled by processes, such as anode junction, and post lithography processes such as etching and plating. Currently ORDYL PR-100 (Dry Film Type) is used for the permanent resist process. TOK has developed TMMR S2000 (Liquid Type) and TMMF S2000 (Dry Film Type) also. TOK has developed a new process utilizing these resist. The electro-forming method by photolithography is developed as one of the methods for enabling high resolution and high aspect formation. In recent years, it has become possible to manufacture conventionally difficult multilayer through our development with material and equipment project (M&E). As for material for electro-forming, it was checked that chemically amplified resist is optimal from the reaction mechanism as it is easily removed by the clean solution. Moreover, multiple plating formations were enabled with the resist through a new process. As for the equipment, TOK developed Applicator (It can apply 500 or more μms) and Developer, which achieves high throughput and quality. The detailed plating formations, which a path differs, and air wiring are realizable through M&E. From the above results, opposed to metallic mold plating, electro-forming method by resist, enabled to form high resolution and aspect pattern, at low cost. It is thought that the infinite possibility spreads by applying this process.

Parylene-based active micro space radiator with thermal contact switch

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ueno, Ai; Suzuki, Yuji

2014-03-03

Thermal management is crucial for highly functional spacecrafts exposed to large fluctuations of internal heat dissipation and/or thermal boundary conditions. Since thermal radiation is the only means for heat removal, effective control of radiation is required for advanced space missions. In the present study, a MEMS (Micro Electro Mechanical Systems) active radiator using the contact resistance change has been proposed. Unlike previous bulky thermal louvers/shutters, higher fill factor can be accomplished with an array of electrostatically driven micro diaphragms suspended with polymer tethers. With an early prototype developed with parylene MEMS technologies, radiation heat flux enhancement up to 42% hasmore » been achieved.« less

Use of multi-functional flexible micro-sensors for in situ measurement of temperature, voltage and fuel flow in a proton exchange membrane fuel cell.

PubMed

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased.

Structural Properties of Silk Electro-Gels

NASA Astrophysics Data System (ADS)

Tabatabai, A. P.; Urbach, J. S.; Blair, D. L.; Kaplan, D. L.

2013-03-01

The interest in Bombyx Mori silk emerges from its biocompatibility and its structural superiority to synthetic polymers. Our particular interest lies in understanding the capabilities of silk electro-gels because of their reversibility and tunable adhesion. We create an electro-gel by applying a DC electric potential across a reconstituted silk fibroin solution derived directly from Bombyx Mori cocoons. This process leads to the intermolecular self-assembly of fibroin proteins into a weak gel. In this talk we will present our results on the effects of applied shear on electro-gels. We quantify the structural properties while dynamically imaging shear induced fiber formation; known as fibrillogenesis. It is observed that the mechanical properties and microstructure of these materials are highly dependent on shear history. We will also discuss the role of surface modification, through micro-patterning, on the observed gel structure. Our results provide an understanding of both the viscoelastiticity and microstucture of reconstituted silks that are being utilized as tissue scaffolds. This work is supported by a grant from the AFOSR FA9550-07-1-0130.

Inertial Navigation Sensors

DTIC Science & Technology

2010-03-01

Characterization Solutions Enabled by Laser Doppler Vibrometer Measurements, Proc. SPIE, Fifth International Conference on Vibration Measurements by Laser ...commercial capabilities: Ring Laser Gyros, Fiber Optic Gyros, and Micro-Electro-Mechanical Systems (MEMS) gyros and accelerometers. RLGs and FOGs are now...augmentation sensors have been tied into the inertial systems; e.g., GPS, velocity meters, seekers, star trackers, magnetometers, lidar , etc. The

Fabrication Techniques for III-V Micro-Opto-Electro-Mechanical Systems

DTIC Science & Technology

2002-03-26

Trifluoride . . . . . . . . . . . . . . . . . . . . . 2-33 ClF3 Chlorine Trifluoride . . . . . . . . . . . . . . . . . . . . . 2-33 xix Symbol Page O2 Oxygen...dimensionless) . . . . . . . . . . . . 2-36 HCl Hydrochloric Acid . . . . . . . . . . . . . . . . . . . . . . 3-16 M Molarity (moles/liter...interhalogen etch gases have been synthesized and used to etch silicon. These gases include bromine triflouride (BrF3) and chlorine trifluoride (ClF3) [27

Artificial Cochlea Design Using Micro-Electro-Mechanical Systems

DTIC Science & Technology

1996-12-17

FIGURE 2-9 - BLOCK DIAGRAM OF THE KATE’S MODEL ................................................ 2-13 FIGURE 2-10 -- COCHLEAR TUNING CURVES FOR KATES MODEL...2-14 FIGURE 2-11 - TUNING CURVE OF A CAT’S COCHLEA .................................................... 2-15...FIGURE 2-12 - FREQUENCY RESPONSE CURVES OF THE VLSI IMPLEMENTATIONS OF THE AN A LO G CO CH LEA

Microstructural Evolution at Micro/Meso-Scale in an Ultrafine-Grained Pure Aluminum Processed by Equal-Channel Angular Pressing with Subsequent Annealing Treatment.

PubMed

Xu, Jie; Li, Jianwei; Zhu, Xiaocheng; Fan, Guohua; Shan, Debin; Guo, Bin

2015-11-04

Micro-forming with ultrafine-grained (UFG) materials is a promising direction for the fabrication of micro-electro-mechanical systems (MEMS) components due to the improved formability, good surface quality, and excellent mechanical properties it provides. In this paper, micro-compression tests were performed using UFG pure aluminum processed by equal-channel angular pressing (ECAP) with subsequent annealing treatment. Microstructural evolution was investigated by electron back-scattered diffraction (EBSD) and transmission electron microscopy (TEM). The results show that microstructural evolutions during compression tests at the micro/meso-scale in UFG pure Al are absolutely different from the coarse-grained (CG) materials. A lot of low-angle grain boundaries (LAGBs) and recrystallized fine grains are formed inside of the original large grains in CG pure aluminum after micro-compression. By contrast, ultrafine grains are kept with few sub-grain boundaries inside the grains in UFG pure aluminum, which are similar to the original microstructure before micro-compression. The surface roughness and coordinated deformation ability can be signmicrostructure; micro/meso-forming; ultrafine grains; ECAP; aluminumificantly improved with UFG pure aluminum, which demonstrates that the UFG materials have a strong potential application in micro/meso-forming.

Planarised optical fiber composite using flame hydrolysis deposition demonstrating an integrated FBG anemometer.

PubMed

Holmes, Christopher; Gates, James C; Smith, Peter G R

2014-12-29

This paper reports for the first time a planarised optical fiber composite formed using Flame Hydrolysis Deposition (FHD). As a way of format demonstration a Micro-Opto-Electro-Mechanical (MOEMS) hot wire anemometer is formed using micro-fabrication processing. The planarised device is rigidly secured to a silicon wafer using optical quality doped silica that has been deposited using flame hydrolysis and consolidated at high temperature. The resulting structure can withstand temperatures exceeding 580K and is sensitive enough to resolve free and forced convection interactions at low fluid velocity.

BiOCl micro-assembles consisting of ultrafine nanoplates: A high performance electro-catalyst for air electrode of Al-air batteries

NASA Astrophysics Data System (ADS)

Yuan, Jinlan; Wang, Jin; She, Yiyi; Hu, Jing; Tao, Pengpeng; Lv, Fucong; Lu, Zhouguang; Gu, Yingying

2014-10-01

BiOCl micro-assembles appearing spherical and plate-like in shape consisting of ultrafine nanoplates were successfully synthesized by a simple hydrothermal method. The obtained BiOCl micro-assembles were characterized as oxygen reduction reaction (ORR) catalyst for air electrode of aluminum air batteries by using linear polarization and constant-current discharge techniques. The effect of precursor concentration on the electrochemical properties of the air electrodes based on the synthesized BiOCl micro-assembles was intensively investigated. The results demonstrated that the BiOCl catalyst exhibited promising ORR performance. Koutecky-Levich analysis indicated that a two-electron reaction was favored for the ORR mechanism of the BiOCl (0.18) sample.

Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures

NASA Astrophysics Data System (ADS)

Chung, Gwiy-Sang; Choi, Sung-Kyu; Nam, Hoy-Duck

2001-10-01

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SDB and SOI membranes and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10 micrometers thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro- heater was fabricated with Pt-RTD on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280 degree(s)C at input power 0.9 W; for the SOI membrane with 10 trenches, it is 580 degree(s)C due to reduction of the external thermal loss. Consequently, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

Fabrication of micro/nano optical fiber by mechano-electrospinning

NASA Astrophysics Data System (ADS)

Chen, Qinnan; Wu, Dezhi; Yu, Zhe; Mei, Xuecui; Fang, Ke; Sun, Daoheng

2017-10-01

We study a novel fabrication method of micro/nano optical fiber by mechano-electrospinning (MES) direct-written technology. MES process is able to precisely manipulate the position and diameter of the electro-spun micro/nano fiber by adjusting the mechanical drawing force, which through changing the speed of motion stage (substrate). By adjusting the substrate speed, the nozzle-to-substrate distance and the applied voltage, the poly(methyl methacrylate) (PMMA) micro/nano optical fibers (MNOF) with controlled diameter are obtained and the tapered MNOF are fabricated by continuously changing the substrate speed. The transmission characteristics of PMMA micro/nano fiber is experimentally demonstrated, and a PMMA micro/nano fiber based refractive index sensor is designed. Our works shows the new fabrication method of MNOF by MES has the potential in the field of light mode conversion, optical waveguide coupling, refractive index detection and new micro/nano optical fiber components.

Laser-induced damage threshold of camera sensors and micro-opto-electro-mechanical systems

NASA Astrophysics Data System (ADS)

Schwarz, Bastian; Ritt, Gunnar; Körber, Michael; Eberle, Bernd

2016-10-01

The continuous development of laser systems towards more compact and efficient devices constitutes an increasing threat to electro-optical imaging sensors such as complementary metal-oxide-semiconductors (CMOS) and charge-coupled devices (CCD). These types of electronic sensors are used in day-to-day life but also in military or civil security applications. In camera systems dedicated to specific tasks, also micro-opto-electro-mechanical systems (MOEMS) like a digital micromirror device (DMD) are part of the optical setup. In such systems, the DMD can be located at an intermediate focal plane of the optics and it is also susceptible to laser damage. The goal of our work is to enhance the knowledge of damaging effects on such devices exposed to laser light. The experimental setup for the investigation of laser-induced damage is described in detail. As laser sources both pulsed lasers and continuous-wave (CW) lasers are used. The laser-induced damage threshold (LIDT) is determined by the single-shot method by increasing the pulse energy from pulse to pulse or in the case of CW-lasers, by increasing the laser power. Furthermore, we investigate the morphology of laser-induced damage patterns and the dependence of the number of destructed device elements on the laser pulse energy or laser power. In addition to the destruction of single pixels, we observe aftereffects like persisting dead columns or rows of pixels in the sensor image.

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

NASA Astrophysics Data System (ADS)

Li, Qichao; Shan, Chao; Yang, Qing; Chen, Feng; Bian, Hao; Hou, Xun

2017-02-01

This paper demonstrates a novel electro-thermal micro actuator's design, fabrication and device tests which combine microfluidic technology and microsolidics process. A three-dimensional solenoid microchannel with high aspect ratio is fabricated inside the silica glass by an improved femtosecond laser wet etch (FLWE) technology, and the diameter of the spiral coil is only 200 μm. Molten alloy (Bi/In/Sn/Pb) with high melting point is injected into the three-dimensional solenoid microchannel inside the silica glass , then it solidifys and forms an electro-thermal micro actuator. The device is capable of achieving precise temperature control and quick response, and can also be easily integrated into MEMS, sensors and `lab on a chip' (LOC) platform inside the fused silica substrate.

Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

NASA Astrophysics Data System (ADS)

Murakoshi, Yoichi; Shan, Xue-Chuan; Sano, Toshio; Takahashi, Masaharu; Maeda, Ryutaro

2004-04-01

Nano imprinting or Nano embossing process have been introduced to fabricate semiconductor, optical device and Micro Electro Mechanical Systems (MEMS) and the Nano Electro Mechanical Systems (NEMS) to reduce the fabrication cost. In our previous paper, micro hot embossing of Polycarbonate (PC) and Polyetheretherketone (PEEK) for optical switch with 8x8 mirrors was reported. The PC and PEEK sheets were embossed at elevated temperature with an embossing machine designed for the MEMS. In the application, the mirrors on the optical switch had some defects, such as slump, sticking and step at side of the mirror, due to embossing process and process conditions. These defects are attributed to the poor materials flow of plastics into the e Ni mold cavity of complicate shape with different aspect ratio. Therefore, the micro hot embossing is optimized in this paper with PTFE sheet to enhance the materials flow. In this paper, the PC and the PEEK sheets, thickness of 300um, are embossed at elevated temperature with the hot embossing machine with a Nickel mold. To control material flow of the PC or the PEEK sheets, Polytetrafluoroethylene (PTFE) sheet, the thickness of 100um, is placed on the PC or the PEEK sheets at elevated temperature. Mirror shape was transferred with better fidelity on the PC and PEEK sheet, and the thickness of cantilever became thinner than previous embossed structure without the PTFE. Especially, the mirror height and the thickness of cantilever on the PC have been improved at lower embossing temperature.

Low-stress doped ultrananocrystalline diamond

DOEpatents

Sumant, Anirudha V.; Buja, Federico; van Spengen, Willem Merlijn

2016-10-25

Nanocrystalline diamond coatings exhibit stress in nano/micro-electro mechanical systems (MEMS). Doped nanocrstalline diamond coatings exhibit increased stress. A carbide forming metal coating reduces the in-plane stress. In addition, without any metal coating, simply growing UNCD or NCD with thickness in the range of 3-4 micron also reduces in-plane stress significantly. Such coatings can be used in MEMS applications.

Hybrid Micro-Electro-Mechanical Tunable Filter

DTIC Science & Technology

2007-09-01

Figure 2.10), one can see the developers have used surface micromachining techniques to build the micromirror structure over the CMOS addressing...DBRs, microcavity composition, initial air gap, contact layers, substrate Dispersion Data Curve -fit dispersion data or generate dispersion function...measurements • Curve -fit the dispersion data or generate a continuous, wavelength-dependent, representation of material dispersion • Manually design the

Relative gravimeter prototype based on micro electro mechanical system

NASA Astrophysics Data System (ADS)

Rozy, A. S. A.; Nugroho, H. A.; Yusuf, M.

2018-03-01

This research to make gravity measurement system by utilizing micro electro mechanical system based sensor in Gal order. System design consists of three parts, design of hardware, software, and interface. The design of the hardware include of designing the sensor design to measure the value of a stable gravity acceleration. The ADXL345 and ADXL335 sensors are tuned to obtain stable measurements. The design of the instrumentation system the next stage by creating a design to integrate between the sensor, microcontroller, and GPS. The design of programming algorithm is done with Arduino IDE software. The interface design uses a 20x4 LCD display to display the gravity acceleration value and store data on the storage media. The system uses a box made of iron and plate leveling to minimize measurement errors. The sensor test shows the ADXL345 sensor has a more stable value. The system is examined by comparing with gravity measurement of gravimeter A-10 results in Bandung observation post. The result of system test resulted the average of system correction value equal to 0.19 Gal. The system is expected to use for mineral exploration, water supply analyze, and earthquake precursor.

An adaptive compensation algorithm for temperature drift of micro-electro-mechanical systems gyroscopes using a strong tracking Kalman filter.

PubMed

Feng, Yibo; Li, Xisheng; Zhang, Xiaojuan

2015-05-13

We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS) gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyroscope temperature drift is constructed mostly on the basis of the temperature sensitivity of the gyroscope. As the state variables of a strong tracking Kalman filter (STKF), the parameters of the temperature drift model can be calculated to adapt to the environment under the support of the compass. These parameters change intelligently with the environment to maintain the precision of the MEMS gyroscope in the changing temperature. The heading error is less than 0.6° in the static temperature experiment, and also is kept in the range from 5° to -2° in the dynamic outdoor experiment. This demonstrates that the proposed algorithm exhibits strong adaptability to a changing temperature, and performs significantly better than KF and MLR to compensate the temperature drift of a gyroscope and eliminate the influence of temperature variation.

Infrared imaging and acoustic sizing of a bubble inside a micro-electro-mechanical system piezo ink channel

NASA Astrophysics Data System (ADS)

van der Bos, Arjan; Segers, Tim; Jeurissen, Roger; van den Berg, Marc; Reinten, Hans; Wijshoff, Herman; Versluis, Michel; Lohse, Detlef

2011-08-01

Piezo drop-on-demand inkjet printers are used in an increasing number of applications because of their reliable deposition of droplets onto a substrate. Droplets of a few picoliters are ejected from an inkjet nozzle at frequencies of up to 100 kHz. However, the entrapment of an air microbubble in the ink channel can severely impede the productivity and reliability of the printing system. The air bubble disturbs the channel acoustics, resulting in disrupted drop formation or failure of the jetting process. Here we study a micro-electro-mechanical systems-based printhead. By using the actuating piezo transducer in receive mode, the acoustical field inside the channel was monitored, clearly identifying the presence of an air microbubble inside the channel during failure of the jetting process. The infrared visualization technique allowed for the accurate sizing of the bubble, including its dynamics, inside the intact printhead. A model was developed to calculate the mutual interaction between the channel acoustics and the bubble dynamics. The model was validated by simultaneous acoustical and infrared detection of the bubble. The model can predict the presence and size of entrapped air bubbles inside an operating ink channel purely from the acoustic response.

Use of Multi-Functional Flexible Micro-Sensors for in situ Measurement of Temperature, Voltage and Fuel Flow in a Proton Exchange Membrane Fuel Cell

PubMed Central

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased. PMID:22163545

Fabrication of silicon nanowires based on-chip micro-supercapacitor

NASA Astrophysics Data System (ADS)

Soam, Ankur; Arya, Nitin; Singh, Aniruddh; Dusane, Rajiv

2017-06-01

An on-chip micro-supercapacitor (μ-SC) based on Silicon nanowires (SiNWs) has been developed by Hot-wire chemical vapor process. First, finger patterned electrodes of Al were made on a silicon nitride coated Si wafer and SiNWs were then grown selectively on the Al electrodes. μ-SC performance has been tested in an ionic electrolyte and a capacitance of 13 μF/cm2 has been obtained by the μ-SC. The resulted μ-SC can be exploited to store the harvesting energy in micro-electro-mechanical-systems and coupled with battery for peak power leveling. Low temperature growth of SiNWs at 350 °C makes it suitable for prospective flexible electronics applications.

X-ray pushing of a mechanical microswing.

PubMed

Siria, A; Rodrigues, M S; Dhez, O; Schwartz, W; Torricelli, G; Ledenmat, S; Rochat, N; Auvert, G; Bikondoa, O; Metzger, T H; Wermeille, D; Felici, R; Comin, F; Chevrier, J

2008-11-05

We report here for the first time the combination of x-ray synchrotron light and a micro-electro-mechanical system (MEMS). We show how it is possible to modulate in real time a MEMS mass distribution to induce a nanometric and tunable mechanical oscillation. The quantitative experimental demonstration we present here uses periodic thermal dilatation of a Ge microcrystal attached to a Si microlever, induced by controlled absorption of an intensity modulated x-ray microbeam. The mechanism proposed can be envisaged either for the detection of small heat flux or for the actuation of a mechanical system.

MEMS (Micro-Electro-Mechanical Systems) for Automotive and Consumer Electronics

NASA Astrophysics Data System (ADS)

Marek, Jiri; Gómez, Udo-Martin

MEMS sensors gained over the last two decades an impressive width of applications: (a) ESP: A car is skidding and stabilizes itself without driver intervention (b) Free-fall detection: A laptop falls to the floor and protects the hard drive by parking the read/write drive head automatically before impact. (c) Airbag: An airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury risk. MEMS sensors are sensing the environmental conditions and are giving input to electronic control systems. These crucial MEMS sensors are making system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Important prerequisites for the success of sensors are their size, functionality, power consumption, and costs. This technical progress in sensor development is realized by micro-machining. The development of these processes was the breakthrough to industrial mass-production for micro-electro-mechanical systems (MEMS). Besides leading-edge micromechanical processes, innovative and robust ASIC designs, thorough simulations of the electrical and mechanical behaviour, a deep understanding of the interactions (mainly over temperature and lifetime) of the package and the mechanical structures are needed. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. This chapter gives an overview of current MEMS technology, its applications and the market share. The MEMS processes are described, and the challenges of MEMS, compared to standard IC fabrication, are discussed. The evolution of MEMS requirements is presented, and a short survey of MEMS applications is shown. Concepts of newest inertial sensors for ESP-systems are given with an emphasis on the design concepts of the sensing element and the evaluation circuit for achieving excellent noise performance. The chapter concludes with an outlook on arising new MEMS applications such as energy harvester and micro fuel cells.

Far-field emission characteristics and linewidth measurements of surface micro-machined MEMS tunable VCSELs

NASA Astrophysics Data System (ADS)

Paul, Sujoy; Gierl, Christian; Gründl, Tobias; Zogal, Karolina; Meissner, Peter; Amann, Markus-Christian; Küppers, Franko

2013-03-01

In this paper, we demonstrate for the first time the far-field experimental results and the linewidth characteris- tics for widely tunable surface-micromachined micro-electro-mechanical system (MEMS) vertical-cavity surface- emitting lasers (VCSELs) operating at 1550 nm. The fundamental Gaussian mode emission is confirmed by optimizing the radius of curvature of top distributed Bragg reflector (DBR) membrane and by choosing an ap- propriate diameter of circular buried tunnel junctions (BTJs) so that only the fundamental Gaussian mode can sustain. For these VCSELs, a mode-hop free continuous tuning over 100 nm has already been demonstrated, which is achieved by electro-thermal tuning of the MEMS mirror. The fiber-coupled optical power of 2mW over the entire tuning range has been reported. The singlemode laser emission has more than 40 dB of side-mode suppression ratio (SMSR). The smallest linewidth achieved with these of MEMS tunable VCSELs is 98MHz which is one order of magnitude higher than that of fixed-wavelength VCSELs.

Three-Dimensional Transport Modeling for Proton Exchange Membrane(PEM) Fuel Cell with Micro Parallel Flow Field

PubMed Central

Lee, Pil Hyong; Han, Sang Seok; Hwang, Sang Soon

2008-01-01

Modeling and simulation for heat and mass transport in micro channel are being used extensively in researches and industrial applications to gain better understanding of the fundamental processes and to optimize fuel cell designs before building a prototype for engineering application. In this study, we used a single-phase, fully three dimensional simulation model for PEMFC that can deal with both anode and cathode flow field for examining the micro flow channel with electrochemical reaction. The results show that hydrogen and oxygen were solely supplied to the membrane by diffusion mechanism rather than convection transport, and the higher pressure drop at cathode side is thought to be caused by higher flow rate of oxygen at cathode. And it is found that the amount of water in cathode channel was determined by water formation due to electrochemical reaction plus electro-osmotic mass flux directing toward the cathode side. And it is very important to model the back diffusion and electro-osmotic mass flux accurately since the two flux was closely correlated each other and greatly influenced for determination of ionic conductivity of the membrane which directly affects the performance of fuel cell. PMID:27879774

Heat transfer and friction characteristics of the microfluidic heat sink with variously-shaped ribs for chip cooling.

PubMed

Wang, Gui-Lian; Yang, Da-Wei; Wang, Yan; Niu, Di; Zhao, Xiao-Lin; Ding, Gui-Fu

2015-04-22

This paper experimentally and numerically investigated the heat transfer and friction characteristics of microfluidic heat sinks with variously-shaped micro-ribs, i.e., rectangular, triangular and semicircular ribs. The micro-ribs were fabricated on the sidewalls of microfluidic channels by a surface-micromachining micro-electro-mechanical system (MEMS) process and used as turbulators to improve the heat transfer rate of the microfluidic heat sink. The results indicate that the utilizing of micro-ribs provides a better heat transfer rate, but also increases the pressure drop penalty for microchannels. Furthermore, the heat transfer and friction characteristics of the microchannels are strongly affected by the rib shape. In comparison, the triangular ribbed microchannel possesses the highest Nusselt number and friction factor among the three rib types.

Modeling and Simulation of Viscous Electro-Active Polymers

PubMed Central

Vogel, Franziska; Göktepe, Serdar; Steinmann, Paul; Kuhl, Ellen

2014-01-01

Electro-active materials are capable of undergoing large deformation when stimulated by an electric field. They can be divided into electronic and ionic electro-active polymers (EAPs) depending on their actuation mechanism based on their composition. We consider electronic EAPs, for which attractive Coulomb forces or local re-orientation of polar groups cause a bulk deformation. Many of these materials exhibit pronounced visco-elastic behavior. Here we show the development and implementation of a constitutive model, which captures the influence of the electric field on the visco-elastic response within a geometrically non-linear finite element framework. The electric field affects not only the equilibrium part of the strain energy function, but also the viscous part. To adopt the familiar additive split of the strain from the small strain setting, we formulate the governing equations in the logarithmic strain space and additively decompose the logarithmic strain into elastic and viscous parts. We show that the incorporation of the electric field in the viscous response significantly alters the relaxation and hysteresis behavior of the model. Our parametric study demonstrates that the model is sensitive to the choice of the electro-viscous coupling parameters. We simulate several actuator structures to illustrate the performance of the method in typical relaxation and creep scenarios. Our model could serve as a design tool for micro-electro-mechanical systems, microfluidic devices, and stimuli-responsive gels such as artificial skin, tactile displays, or artificial muscle. PMID:25267881

MOEMs devices designed and tested for future astronomical instrumentation in space

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Lanzoni, Patrick; Waldis, Severin; Noell, Wilfried; Conedera, Veronique; Fabre, Norbert; Viard, Thierry; Buisset, Christophe

2017-11-01

Next generation of astronomical instrumentation for space telescopes requires Micro-Opto-Electro- Mechanical Systems (MOEMS) with remote control capability and cryogenic operation. MOEMS devices have the capability to tailor the incoming light in terms of intensity and object selection with programmable slit masks, in terms of phase and wavefront control with micro-deformable mirrors, and finally in terms of spectrum with programmable diffraction gratings. Applications are multi-object spectroscopy (MOS), wavefront correction and programmable spectrographs. We are engaged since several years in the design, realization and characterization of MOEMS devices suited for astronomical instrumentation.

Coupled Electro-Hydrodynamic Effects of Electro-Osmosis from Pore Scale to Darcy Scale

NASA Astrophysics Data System (ADS)

Schotting, R.; Joekar-Niasar, V.; Leijnse, A.

2011-12-01

Electro-osmosis is "movement of a fluid under the effect of an electric field in a porous medium". This phenomenon has many applications in civil engineering (slope stabilization, dewatering), environmental engineering (soil remediation, sludge dewatering), chemical engineering (micro- or nano- mixers), medical engineering (drug delivery), etc. The key factor in electro-osmosis is the competition between the electrochemical and hydrodynamic forces as well as the coupling between the solid surface and the electrolyte properties. The objective of this research is to understand the influence of pore-scale heterogeneities of surface properties on the Darcy-scale behavior. We develop novel analytical solutions for the flow and transport of electrolyte including electro-hydrodynamic forces in a single micro-channel. We propose the complete analytical solution for monovalent electrolyte at full range overlapping double layers, and nonlinear electric field, including the Donan effect in transport of ions. These pore-scale formulations are numerically upscaled to obtain the Darcy-scale behavior. Our results show the contribution of electro-osmotic, chemical-osmotic and hydrodynamic components of the flow equation on pressure field evolution and multi-directional flow field at Darcy scale.

Cellulose Electro-Active Paper: From Discovery to Technology Applications

NASA Astrophysics Data System (ADS)

Abas, Zafar; Kim, Heung Soo; Kim, Jaehwan; Kim, Joo-Hyung

2014-09-01

Cellulose electro-active paper (EAPap) is an attractive material of electro-active polymers (EAPs) family due to its smart characteristics. EAPap is thin cellulose film coated with metal electrodes on both sides. Its large displacement output, low actuation voltage and low power consumption can be used for biomimetic sensors/actuators and electromechanical system. Because cellulose EAPap is ultra-lightweight, easy to manufacture, inexpensive, biocompatible, and biodegradable, it has been employed for many applications such as bending actuator, vibration sensor, artificial muscle, flexible speaker, and can be advantageous in areas such as micro-insect robots, micro-flying objects, microelectromechanical systems, biosensors, and flexible displays.

Thermal analysis of MHD electro-osmotic peristaltic pumping of Casson fluid through a rotating asymmetric micro-channel

NASA Astrophysics Data System (ADS)

Venugopal Reddy, Kattamreddy; Makinde, Oluwole Daniel; Gnaneswara Reddy, Machireddy

2018-05-01

In this paper, we investigate the combined effects of wall slip, viscous dissipation, and Joule heating on MHD electro-osmotic peristaltic motion of Casson fluid with heat transfer through a rotating asymmetric micro-channel. Using long wavelength and small Reynolds number assumptions, the governing equations of momentum and energy balance are obtained and tackled analytically. The effects of various embedding parameters on the stream function, velocity, temperature, skin friction, Nusselt number and trapping phenomenon are displayed graphically and discussed. It is found that Casson fluid velocity, temperature, and heat transfer rate are enhanced with a boost in electro-osmotic force.

Application of Inkjet-Printing Technology to Micro-Electro-Mechanical Systems

DTIC Science & Technology

2014-05-01

dimensional MEMS using inkjet-printing metal nanoparticles and demonstrated resonant inductive coils, electrostatic-drive motors, and electrothermal actuators...telecommunications base stataions, satellites and defense systems [48]. 1.4 Printed Microshell Encapsulation In this thesis, a fabrication process was...that the solvent of the ink needs to be heat-compatible, which may limit the range of solvent that can be used. For example, most bio -compatible

Holographic memory using beam steering

NASA Technical Reports Server (NTRS)

Chao, Tien-Hsin (Inventor); Hanan, Jay C. (Inventor); Reyes, George F. (Inventor); Zhou, Hanying (Inventor)

2006-01-01

A method, apparatus, and system provide the ability for storing holograms at high speed. A single laser diode emits a collimated laser beam to both write to and read from a photorefractice crystal. One or more liquid crystal beam steering spatial light modulators (BSSLMs) or Micro-Electro-Mechanical Systems (MEMS) mirrors steer a reference beam, split from the collimated laser beam, at high speed to the photorefractive crystal.

Joint Terminal Attack Controllers Sensors and Lasers Modernization

DTIC Science & Technology

2012-09-01

and Evaluation Activity MCSC Marine Corps Systems Command MCT Marine Corps Task MCTL Marine Corps Task List MEMS MicroElectroMechanical Systems...functional relationship of the key performance requirements was associated to Marine Corps Tasks ( MCT ), Critical Operational Issues (COIs...to an accomplishment of mission objectives and achievement of desired results [5]. All COIs are linked to a MCT , which are provided within the

Simulation of MEMS for the Next Generation Space Telescope

NASA Technical Reports Server (NTRS)

Mott, Brent; Kuhn, Jonathan; Broduer, Steve (Technical Monitor)

2001-01-01

The NASA Goddard Space Flight Center (GSFC) is developing optical micro-electromechanical system (MEMS) components for potential application in Next Generation Space Telescope (NGST) science instruments. In this work, we present an overview of the electro-mechanical simulation of three MEMS components for NGST, which include a reflective micro-mirror array and transmissive microshutter array for aperture control for a near infrared (NIR) multi-object spectrometer and a large aperture MEMS Fabry-Perot tunable filter for a NIR wide field camera. In all cases the device must operate at cryogenic temperatures with low power consumption and low, complementary metal oxide semiconductor (CMOS) compatible, voltages. The goal of our simulation efforts is to adequately predict both the performance and the reliability of the devices during ground handling, launch, and operation to prevent failures late in the development process and during flight. This goal requires detailed modeling and validation of complex electro-thermal-mechanical interactions and very large non-linear deformations, often involving surface contact. Various parameters such as spatial dimensions and device response are often difficult to measure reliably at these small scales. In addition, these devices are fabricated from a wide variety of materials including surface micro-machined aluminum, reactive ion etched (RIE) silicon nitride, and deep reactive ion etched (DRIE) bulk single crystal silicon. The above broad set of conditions combine to be a formidable challenge for space flight qualification analysis. These simulations represent NASA/GSFC's first attempts at implementing a comprehensive strategy to address complex MEMS structures.

Liquid crystal waveguides: new devices enabled by >1000 waves of optical phase control

NASA Astrophysics Data System (ADS)

Davis, Scott R.; Farca, George; Rommel, Scott D.; Johnson, Seth; Anderson, Michael H.

2010-02-01

A new electro-optic waveguide platform, which provides unprecedented voltage control over optical phase delays (> 2mm), with very low loss (< 0.5 dB/cm) and rapid response time (sub millisecond), will be presented. This technology, developed by Vescent Photonics, is based upon a unique liquid-crystal waveguide geometry, which exploits the tremendous electro-optic response of liquid crystals while circumventing their historic limitations. The waveguide geometry provides nematic relaxation speeds in the 10's of microseconds and LC scattering losses that are reduced by orders of magnitude from bulk transmissive LC optics. The exceedingly large optical phase delays accessible with this technology enable the design and construction of a new class of previously unrealizable photonic devices. Examples include: 2-D analog non-mechanical beamsteerers, chip-scale widely tunable lasers, chip-scale Fourier transform spectrometer (< 5 nm resolution demonstrated), widely tunable micro-ring resonators, tunable lenses, ultra-low power (< 5 microWatts) optical switches, true optical time delay devices for phased array antennas, and many more. All of these devices may benefit from established manufacturing technologies and ultimately may be as inexpensive as a calculator display. Furthermore, this new integrated photonic architecture has applications in a wide array of commercial and defense markets including: remote sensing, micro-LADAR, OCT, FSO, laser illumination, phased array radar, etc. Performance attributes of several example devices and application data will be presented. In particular, we will present a non-mechanical beamsteerer that steers light in both the horizontal and vertical dimensions.

Sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Chan, Pin-Cheng; Lin, Chia-Hung

2010-01-01

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06±0.005 (Ω/°C) and 0.033 pF/%RH, respectively.

Electro-osmotically driven liquid delivery method and apparatus

DOEpatents

Rakestraw, D.J.; Anex, D.S.; Yan, C.; Dadoo, R.; Zare, R.N.

1999-08-24

Method and apparatus are disclosed for controlling precisely the composition and delivery of liquid at sub-{micro}L/min flow rate. One embodiment of such a delivery system is an electro-osmotically driven gradient flow delivery system that generates dynamic gradient flows with sub-{micro}L/min flow rates by merging a plurality of electro-osmotic flows. These flows are delivered by a plurality of delivery arms attached to a mixing connector, where they mix and then flow into a receiving means, preferably a column. Each inlet of the plurality of delivery arms is placed in a corresponding solution reservoir. A plurality of independent programmable high-voltage power supplies is used to apply a voltage program to each of the plurality of solution reservoirs to regulate the electro-osmotic flow in each delivery arm. The electro-osmotic flow rates in the delivery arms are changed with time according to each voltage program to deliver the required gradient profile to the column. 4 figs.

Measurement of material mechanical properties in microforming

NASA Astrophysics Data System (ADS)

Yun, Wang; Xu, Zhenying; Hui, Huang; Zhou, Jianzhong

2006-02-01

As the rapid market need of micro-electro-mechanical systems engineering gives it the wide development and application ranging from mobile phones to medical apparatus, the need of metal micro-parts is increasing gradually. Microforming technology challenges the plastic processing technology. The findings have shown that if the grain size of the specimen remains constant, the flow stress changes with the increasing miniaturization, and also the necking elongation and the uniform elongation etc. It is impossible to get the specimen material properties in conventional tensile test machine, especially in the high precision demand. Therefore, one new measurement method for getting the specimen material-mechanical property with high precision is initiated. With this method, coupled with the high speed of Charge Coupled Device (CCD) camera and high precision of Coordinate Measuring Machine (CMM), the elongation and tensile strain in the gauge length are obtained. The elongation, yield stress and other mechanical properties can be calculated from the relationship between the images and CCD camera movement. This measuring method can be extended into other experiments, such as the alignment of the tool and specimen, micro-drawing process.

Electro-Mechanical Simulation of a Large Aperture MOEMS Fabry-Perot Tunable Filter

NASA Technical Reports Server (NTRS)

Kuhn, Jonathan L.; Barclay, Richard B.; Greenhouse, Matthew A.; Mott, D. Brent; Satyapal, Shobita; Powers, Edward I. (Technical Monitor)

2000-01-01

We are developing a micro-machined electrostatically actuated Fabry-Perot tunable filter with a large clear aperture for application in high through-put wide-field imaging spectroscopy and lidar systems. In the first phase of this effort, we are developing key components based on coupled electro-mechanical simulations. In particular, the movable etalon plate design leverages high coating stresses to yield a flat surface in drum-head tension over a large diameter (12.5 mm). In this approach, the cylindrical silicon movable plate is back etched, resulting in an optically coated membrane that is suspended from a thick silicon support ring. Understanding the interaction between the support ring, suspended membrane, and coating is critical to developing surfaces that are flat to within stringent etalon requirements. In this work, we present the simulations used to develop the movable plate, spring suspension system, and electrostatic actuation mechanism. We also present results from tests of fabricated proof of concept components.

Towards a physics-based multiscale modelling of the electro-mechanical coupling in electro-active polymers.

PubMed

Cohen, Noy; Menzel, Andreas; deBotton, Gal

2016-02-01

Owing to the increasing number of industrial applications of electro-active polymers (EAPs), there is a growing need for electromechanical models which accurately capture their behaviour. To this end, we compare the predicted behaviour of EAPs undergoing homogeneous deformations according to three electromechanical models. The first model is a phenomenological continuum-based model composed of the mechanical Gent model and a linear relationship between the electric field and the polarization. The electrical and the mechanical responses according to the second model are based on the physical structure of the polymer chain network. The third model incorporates a neo-Hookean mechanical response and a physically motivated microstructurally based long-chains model for the electrical behaviour. In the microstructural-motivated models, the integration from the microscopic to the macroscopic levels is accomplished by the micro-sphere technique. Four types of homogeneous boundary conditions are considered and the behaviours determined according to the three models are compared. For the microstructurally motivated models, these analyses are performed and compared with the widely used phenomenological model for the first time. Some of the aspects revealed in this investigation, such as the dependence of the intensity of the polarization field on the deformation, highlight the need for an in-depth investigation of the relationships between the structure and the behaviours of the EAPs at the microscopic level and their overall macroscopic response.

Automatization Project for the Carl-Zeiss-Jena Coudè Telescope of the Simón Bolívar Planetarium I. The Electro-Mechanic System

NASA Astrophysics Data System (ADS)

Núñez, A.; Maharaj, A.; Muñoz, A. G.

2009-05-01

The ``Complejo Científico, Cultural y Turístico Simón Bolívar'' (CCCTSB), located in Maracaibo, Venezuela, lodges the Simón Bolívar Planetarium and an 150 mm aperture, 2250 mm focal length Carl-Zeiss-Jena Coudè refractor telescope. In this work we discuss the schematics for the automatization project of this Telescope, the planned improvements, methodology, engines, micro-controllers, interfaces and the uptodate status of the project. This project is working on the first two levels of the automation pyramid, the sensor -- actuator level and the control or Plant floor level. The Process control level correspond to the software related section. This mean that this project work immediately with the electrical, electronic and mechanical stuffs, and with the assembler micro controller language. All the pc related stuff, like GUI (Graphic user interfaces), remote control, Grid database, and others, correspond to the next two automation pyramid levels. The idea is that little human intervention will be required to manipulate the telescope, only giving a pair of coordinates to ubicate and follow an object on the sky. A set of three servomotors, coupling it with the telescope with a gear box, are going to manipulate right ascension, declination and focus movement. For the dome rotation, a three phase induction motor will be used. For dome aperture/closure it is suggested a DC motor powered with solar panels. All those actuators are controlled by a 8 bits micro-controller, which receive the coordinate imput, the signal from the position sensors and have the PID control algorithm. This algorithm is tuned based on the mathematical model of the telescope electro-mechanical instrumentation.

Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Chang, Chi-Chung; Lo, Yi-Man

2010-01-01

Integration of a reformer and a proton exchange membrane fuel cell (PEMFC) is problematic due to the presence in the gas from the reforming process of a slight amount of carbon monoxide. Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell subsequently degrading the fuel cell performance, and necessitating the sublimation of the reaction gas before supplying to fuel cells. Based on the use of micro-electro-mechanical systems (MEMS) technology to manufacture flexible micro CO sensors, this study elucidates the relation between a micro CO sensor and different SnO2 thin film thicknesses. Experimental results indicate that the sensitivity increases at temperatures ranging from 100–300 °C. Additionally, the best sensitivity is obtained at a specific temperature. For instance, the best sensitivity of SnO2 thin film thickness of 100 nm at 300 °C is 59.3%. Moreover, a flexible micro CO sensor is embedded into a micro reformer to determine the CO concentration in each part of a micro reformer in the future, demonstrating the inner reaction of a micro reformer in depth and immediate detection. PMID:22163494

Development and analysis of new type microresonator with electro-optic feedback

NASA Astrophysics Data System (ADS)

Janusas, Giedrius; Palevicius, Arvydas; Cekas, Elingas; Brunius, Alfredas; Bauce, Jokubas

2016-04-01

Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.

Potential and challenges of body area networks for cardiac monitoring.

PubMed

Gyselinckx, Bert; Penders, Julien; Vullers, Ruud

2007-01-01

This article gives an overview of results of the Human++ research program related to cardiac monitoring (http://www.imec-nl.nl/). This research aims to achieve highly miniaturized and nearly autonomous sensor systems that assist our health and comfort. It combines expertise in wireless ultra-low-power communications, packaging and 3D integration technologies, Micro Electro Mechanical Systems (MEMS) energy scavenging techniques, and low-power design techniques.

Design and modeling of an efficiency horizontal thermal micro-actuator with integrated piezoresistors for precise control.

PubMed

Zhang, Yan; Lee, Dong-Weon

2010-05-01

An integrated system made up of a double-hot arm electro-thermal microactuator and a piezoresistor embedded at the base of the 'cold arm' is proposed. The electro-thermo-mechanical modeling and optimization is developed to elaborate the operation mechanism of the hybrid system through numerical simulations. For given materials, the geometry design mostly influences the performance of the sensor and actuator, which can be considered separately. That is because thermal expansion induced heating energy has less influence on the base area of the 'cold arm,' where is the maximum stress. The piezoresistor is positioned here for large sensitivity to monitor the in-plane movement of the system and characterize the actuator response precisely in real time. Force method is used to analyze the thermal induced mechanical expansion in the redundant structure. On the other hand, the integrated actuating mechanism is designed for high speed imaging. Based on the simulation results, the actuator operates at levels below 5 mA appearing to be very reliable, and the stress sensitivity is about 40 MPa per micron.

A novel method for in-situ monitoring of local voltage, temperature and humidity distributions in fuel cells using flexible multi-functional micro sensors.

PubMed

Lee, Chi-Yuan; Fan, Wei-Yuan; Chang, Chih-Ping

2011-01-01

In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchange membrane fuel cell (PEMFC) and used to simultaneously measure variations in the inner voltage, temperature and humidity. The accuracy and reproducibility of the calibrated results obtained using the proposed micro sensors is excellent. The experimental results indicate that, at high current density and 100%RH or 75%RH, the relative humidity midstream and downstream saturates due to severe flooding. The performance of the PEM fuel cell can be stabilized using home-made flexible multi-functional micro sensors by the in-situ monitoring of local voltage, temperature and humidity distributions within it.

A Novel Method for In-Situ Monitoring of Local Voltage, Temperature and Humidity Distributions in Fuel Cells Using Flexible Multi-Functional Micro Sensors

PubMed Central

Lee, Chi-Yuan; Fan, Wei-Yuan; Chang, Chih-Ping

2011-01-01

In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchange membrane fuel cell (PEMFC) and used to simultaneously measure variations in the inner voltage, temperature and humidity. The accuracy and reproducibility of the calibrated results obtained using the proposed micro sensors is excellent. The experimental results indicate that, at high current density and 100%RH or 75%RH, the relative humidity midstream and downstream saturates due to severe flooding. The performance of the PEM fuel cell can be stabilized using home-made flexible multi-functional micro sensors by the in-situ monitoring of local voltage, temperature and humidity distributions within it. PMID:22319361

Programmable wide field spectrograph for earth observation

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Lanzoni, Patrick; Liotard, Arnaud; Viard, Thierry; Costes, Vincent; Hébert, Philippe-Jean

2017-11-01

In Earth Observation, Universe Observation and Planet Exploration, scientific return of the instruments must be optimized in future missions. Micro-Opto-Electro-Mechanical Systems (MOEMS) could be key components in future generation of space instruments. These devices are based on the mature micro-electronics technology and in addition to their compactness, scalability, and specific task customization, they could generate new functions not available with current technologies. French and European space agencies, the Centre National d'Etudes Spatiales (CNES) and the European Space Agency (ESA) have initiated several studies with LAM and TAS for listing the new functions associated with several types of MEMS, and developing new ideas of instruments.

Application of Electro Chemical Machining for materials used in extreme conditions

NASA Astrophysics Data System (ADS)

Pandilov, Z.

2018-03-01

Electro-Chemical Machining (ECM) is the generic term for a variety of electrochemical processes. ECM is used to machine work pieces from metal and metal alloys irrespective of their hardness, strength or thermal properties, through the anodic dissolution, in aerospace, automotive, construction, medical equipment, micro-systems and power supply industries. The Electro Chemical Machining is extremely suitable for machining of materials used in extreme conditions. General overview of the Electro-Chemical Machining and its application for different materials used in extreme conditions is presented.

BioMEMS to bionanotechnology: state of the art in integrated biochips and future prospects

NASA Astrophysics Data System (ADS)

Gupta, Amit; Li, H.; Gomez, Rafael; Chang, W.-J.; Koo, Y. M.; Chang, H.; Andreadakis, G.; Akin, Demir; Bashir, Rashid

2004-12-01

Biomedical or Biological Micro-Electro-Mechanical- Systems (BioMEMS) have in recent years become increasingly prevalent and have found widespread use in a wide variety of applications such as diagnostics, therapeutics and tissue engineering. This paper reviews the interdisciplinary work performed in our group in recent years to develop micro-integrated devices to characterize biological entities. We present the use of electrical and mechanically based phenomena to perform characterization and various functions needed for integrated biochips. One sub-system takes advantage of the dielectrophoretic effect to sort and concentrate bacterial cells and viruses within a micro-fluidic biochip. Another sub-system measures impedance changes produced by the metabolic activity of bacterial cells to determine their viability. A third sub-system is used to detect the mass of viruses as they bind to micro-mechanical sensors. The last sub-system described has been used to detect the charge on DNA molecules as it translocates through nanopore channels. These devices with an electronic or mechanical signal output can be very useful in producing practical systems for rapid detection and characterization of cells for a wide variety of applications in the food safety and health diagnostics industries. The paper will also briefly discuss future prospects of BioMEMS and its possible impact and on bionanotechnology.

Sub-micro-liter Electrochemical Single-Nucleotide-Polymorphism Detector for Lab-on-a-Chip System

NASA Astrophysics Data System (ADS)

Tanaka, Hiroyuki; Fiorini, Paolo; Peeters, Sara; Majeed, Bivragh; Sterken, Tom; de Beeck, Maaike Op; Hayashi, Miho; Yaku, Hidenobu; Yamashita, Ichiro

2012-04-01

A sub-micro-liter single-nucleotide-polymorphism (SNP) detector for lab-on-a-chip applications is developed. This detector enables a fast, sensitive, and selective SNP detection directly from human blood. The detector is fabricated on a Si substrate by a standard complementary metal oxide semiconductor/micro electro mechanical systems (CMOS/MEMS) process and Polydimethylsiloxane (PDMS) molding. Stable and reproducible measurements are obtained by implementing an on-chip Ag/AgCl electrode and encapsulating the detector. The detector senses the presence of SNPs by measuring the concentration of pyrophosphoric acid generated during selective DNA amplification. A 0.5-µL-volume detector enabled the successful performance of the typing of a SNP within the ABO gene using human blood. The measured sensitivity is 566 pA/µM.

Review of Polyimides Used in the Manufacturing of Micro Systems

NASA Technical Reports Server (NTRS)

Wilson, William C.; Atkinson, Gary M.

2007-01-01

Since their invention, polyimides have found numerous uses in MicroElectroMechanical Systems (MEMS) technology. Polyimides can act as photoresist, sacrificial layers, structural layers, and even as a replacement for silicon as the substrate during MEMS fabrication. They enable fabrication of both low and high aspect ratio devices. Polyimides have been used to fabricate expendable molds and reusable flexible molds. Development of a variety of devices that employ polyimides for sensor applications has occurred. Micro-robotic actuator applications include hinges, thermal actuators and residual stress actuators. Currently, polyimides are being used to create new sensors and devices for aerospace applications. This paper presents a review of some of the many uses of polyimides in the development of MEMS devices, including a new polyimide based MEMS fabrication process.

Meissner-levitated micro-systems

NASA Astrophysics Data System (ADS)

Coombs, T. A.; Samad, I.; Hong, Z.; Eves, D.; Rastogi, A.

2006-06-01

Advanced silicon processing techniques developed for the Very Large Scale Integration (VLSI) industry have been exploited in recent years to enable the production of micro-fabricated moving mechanical systems known as Micro Electro Mechanical Systems (MEMS). These devices offer advantages in terms of cost, scalability and robustness over their preceding equivalents. Cambridge University have worked for many years on the investigation of high temperature superconductors (HTS) in flywheel energy storage applications. This experience is now being used to research into superconducting Micro-Bearings for MEMS, whereby circular permanent magnet arrays are levitated and spun above a superconductor to produce bearings suitable for motors and other micron scale devices. The novelty in the device lies in the fact that the rotor is levitated into position by Meissner flux exclusion, whilst stability is provided by flux pinned within the body of the superconductor. This work includes: the investigation of the properties of various magnetic materials, their fabrication processes and their suitability for MEMS; finite element analysis to analyse the interaction between the magnetic materials and YBCO to determine the stiffness and height of levitation. Finally a micro-motor with the above principles is currently being fabricated within the group.

Real Time Monitoring of Temperature of a Micro Proton Exchange Membrane Fuel Cell

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Hu, Yuh-Chung; Shih, Wen-Pin; Fan, Wei-Yuan; Chuang, Chih-Wei

2009-01-01

Silicon micro-hole arrays (Si-MHA) were fabricated as a gas diffusion layer (GDL) in a micro fuel cell using the micro-electro-mechanical-systems (MEMS) fabrication technique. The resistance temperature detector (RTD) sensor was integrated with the GDL on a bipolar plate to measure the temperature inside the fuel cell. Experimental results demonstrate that temperature was generally linearly related to resistance and that accuracy and sensitivity were within 0.5 °C and 1.68×10−3/°C, respectively. The best experimental performance was 9.37 mW/cm2 at an H2/O2 dry gas flow rate of 30/30 SCCM. Fuel cell temperature during operation was 27 °C, as measured using thermocouples in contact with the backside of the electrode. Fuel cell operating temperature measured in situ was 30.5 °C. PMID:22573963

MEMS in Space Systems

NASA Technical Reports Server (NTRS)

Lyke, J. C.; Michalicek, M. A.; Singaraju, B. K.

1995-01-01

Micro-electro-mechanical systems (MEMS) provide an emerging technology that has the potential for revolutionizing the way space systems are designed, assembled, and tested. The high launch costs of current space systems are a major determining factor in the amount of functionality that can be integrated in a typical space system. MEMS devices have the ability to increase the functionality of selected satellite subsystems while simultaneously decreasing spacecraft weight. The Air Force Phillips Laboratory (PL) is supporting the development of a variety of MEMS related technologies as one of several methods to reduce the weight of space systems and increase their performance. MEMS research is a natural extension of PL research objectives in micro-electronics and advanced packaging. Examples of applications that are under research include on-chip micro-coolers, micro-gyroscopes, vibration sensors, and three-dimensional packaging technologies to integrate electronics with MEMS devices. The first on-orbit space flight demonstration of these and other technologies is scheduled for next year.

The Global Positioning System for Military Users: Current Modernization Plans and Alternatives

DTIC Science & Technology

2011-10-01

stronger signal would not be available. That drawback might be mitigated, however, by the widespread availability on the commercial market of small...development efforts needed to achieve such reductions would have associated costs. An additional drawback of Option 2 is that operation of iGPS...the Foucault pendulum but uses a vibrating element, known as a Micro Electro-Mechanical System, instead of an actual pendulum . iGPS Module. The

BioMEMS –Advancing the Frontiers of Medicine

PubMed Central

James, Teena; Mannoor, Manu Sebastian; Ivanov, Dentcho V.

2008-01-01

Biological and medical application of micro-electro-mechanical-systems (MEMS) is currently seen as an area of high potential impact. Integration of biology and microtechnology has resulted in the development of a number of platforms for improving biomedical and pharmaceutical technologies. This review provides a general overview of the applications and the opportunities presented by MEMS in medicine by classifying these platforms according to their applications in the medical field. PMID:27873858

The Potential of Micro Electro Mechanical Systems and Nanotechnology for the U.S. Army

DTIC Science & Technology

2001-05-01

Quantitative Structure Activity Relationship ( QSAR ) model . The QSAR model calculates the proper composition of the polymer-carbon black matrix...example, the BEI Gyrochip Model QRS11 from Systron Donner Inertial Division has a startup time of less than 1 second, a Mean Time Between Failure (MTBF... modeling from many equations per atom to a few lines of code. This approach is amenable to parallel processing. Nevertheless, their programs require

Resourceful Computing in Unstructured Environments

DTIC Science & Technology

1991-07-31

D.J. Ehrlich, K.R. Udayakumar and L.E. Cross. "Piezoelectric Micromotors for Microrobots." Proceedings of the 1990 Ultrasonics Symposium, Honolulu...HI, Dec. 4-7, 1990. Flynn, A.M., L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udayakumar and L.E. Cross. "Piezoelectric Micromotors for...Ehrlich. "Ferroelectric Thin Films for Ultrasonic Micromotors ." Proceedings of the Micro Electro Mechanical Systems Conference, Nara, JAPAN. January 30

Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations

PubMed Central

Palevicius, Paulius; Ragulskis, Minvydas; Palevicius, Arvydas; Ostasevicius, Vytautas

2014-01-01

Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms. PMID:24451467

Advanced adaptive optics technology development

NASA Astrophysics Data System (ADS)

Olivier, Scot S.

2002-02-01

The NSF Center for Adaptive Optics (CfAO) is supporting research on advanced adaptive optics technologies. CfAO research activities include development and characterization of micro-electro-mechanical systems (MEMS) deformable mirror (DM) technology, as well as development and characterization of high-resolution adaptive optics systems using liquid crystal (LC) spatial light modulator (SLM) technology. This paper presents an overview of the CfAO advanced adaptive optics technology development activities including current status and future plans.

Modeling Microscale Electro-thermally Induced Vortex Flows

NASA Astrophysics Data System (ADS)

Paul, Rajorshi; Tang, Tian; Kumar, Aloke

2017-11-01

In presence of a high frequency alternating electric field and a laser induced heat source, vortex flows are generated inside micro-channels. Such electro-thermally influenced micro-vortices can be used for manipulating nano-particles, programming colloidal assemblies, trapping biological cells as well as for fabricating designed bacterial biofilms. In this study, a theoretical model is developed for microscale electro-thermally induced vortex flows with multiple heat sources. Semi-analytical solutions are obtained, using Hankel transformation and linear superposition, for the temperature, pressure and velocity fields. The effect of material properties such as electrical and thermal conductivities, as well as experimental parameters such as the frequency and strength of the alternating electric field, and the intensity and heating profile of the laser source, are systematically investigated. Resolution for a pair of laser sources is determined by analyzing the strength of the micro-vortices under the influence of two heating sources. Results from this work will provide useful insights into the design of efficient optical tweezers and Rapid Electrokinetic Patterning techniques.

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

NASA Astrophysics Data System (ADS)

Osmani, Bekim; Töpper, Tino; Deschenaux, Christian; Nohava, Jiri; Weiss, Florian M.; Leung, Vanessa; Müller, Bert

2015-02-01

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films are micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.

MEMS Micro-Valve for Space Applications

NASA Technical Reports Server (NTRS)

Chakraborty, I.; Tang, W. C.; Bame, D. P.; Tang, T. K.

1998-01-01

We report on the development of a Micro-ElectroMechanical Systems (MEMS) valve that is designed to meet the rigorous performance requirements for a variety of space applications, such as micropropulsion, in-situ chemical analysis of other planets, or micro-fluidics experiments in micro-gravity. These systems often require very small yet reliable silicon valves with extremely low leak rates and long shelf lives. Also, they must survive the perils of space travel, which include unstoppable radiation, monumental shock and vibration forces, as well as extreme variations in temperature. Currently, no commercial MEMS valve meets these requirements. We at JPL are developing a piezoelectric MEMS valve that attempts to address the unique problem of space. We begin with proven configurations that may seem familiar. However, we have implemented some major design innovations that should produce a superior valve. The JPL micro-valve is expected to have an extremely low leak rate, limited susceptibility to particulates, vibration or radiation, as well as a wide operational temperature range.

Ultra-Sensitive Strain Sensor Based on Flexible Poly(vinylidene fluoride) Piezoelectric Film

NASA Astrophysics Data System (ADS)

Lu, Kai; Huang, Wen; Guo, Junxiong; Gong, Tianxun; Wei, Xiongbang; Lu, Bing-Wei; Liu, Si-Yi; Yu, Bin

2018-03-01

A flexible 4 × 4 sensor array with 16 micro-scale capacitive units has been demonstrated based on flexible piezoelectric poly(vinylidene fluoride) (PVDF) film. The piezoelectricity and surface morphology of the PVDF were examined by optical imaging and piezoresponse force microscopy (PFM). The PFM shows phase contrast, indicating clear interface between the PVDF and electrode. The electro-mechanical properties show that the sensor exhibits excellent output response and an ultra-high signal-to-noise ratio. The output voltage and the applied pressure possess linear relationship with a slope of 12 mV/kPa. The hold-and-release output characteristics recover in less than 2.5 μs, demonstrating outstanding electro-mechanical response. Additionally, signal interference between the adjacent arrays has been investigated via theoretical simulation. The results show the interference reduces with decreasing pressure at a rate of 0.028 mV/kPa, highly scalable with electrode size and becoming insignificant for pressure level under 178 kPa.

Ultra-Sensitive Strain Sensor Based on Flexible Poly(vinylidene fluoride) Piezoelectric Film.

PubMed

Lu, Kai; Huang, Wen; Guo, Junxiong; Gong, Tianxun; Wei, Xiongbang; Lu, Bing-Wei; Liu, Si-Yi; Yu, Bin

2018-03-14

A flexible 4 × 4 sensor array with 16 micro-scale capacitive units has been demonstrated based on flexible piezoelectric poly(vinylidene fluoride) (PVDF) film. The piezoelectricity and surface morphology of the PVDF were examined by optical imaging and piezoresponse force microscopy (PFM). The PFM shows phase contrast, indicating clear interface between the PVDF and electrode. The electro-mechanical properties show that the sensor exhibits excellent output response and an ultra-high signal-to-noise ratio. The output voltage and the applied pressure possess linear relationship with a slope of 12 mV/kPa. The hold-and-release output characteristics recover in less than 2.5 μs, demonstrating outstanding electro-mechanical response. Additionally, signal interference between the adjacent arrays has been investigated via theoretical simulation. The results show the interference reduces with decreasing pressure at a rate of 0.028 mV/kPa, highly scalable with electrode size and becoming insignificant for pressure level under 178 kPa.

Excellent magnetocaloric properties of melt-extracted Gd-based amorphous microwires

NASA Astrophysics Data System (ADS)

Bingham, N. S.; Wang, H.; Qin, F.; Peng, H. X.; Sun, J. F.; Franco, V.; Srikanth, H.; Phan, M. H.

2012-09-01

We report upon the excellent magnetocaloric properties of Gd53Al24Co20Zr3 amorphous microwires. In addition to obtaining the large magnetic entropy change (-ΔSM ˜ 10.3 J/kg K at TC ˜ 95 K), an extremely large value of refrigerant capacity (RC ˜ 733.4 J/kg) has been achieved for a field change of 5 T in an array of forty microwires arranged in parallel. This value of RC is about 79% and 103% larger than those of Gd (˜410 J/kg) and Gd5Si2Ge1.9Fe0.1 (˜360 J/kg) regardless of their magnetic ordering temperatures. The design and fabrication of a magnetic bed made of these parallel-arranged microwires would thus be a very promising approach for active magnetic refrigeration for nitrogen liquefaction. Since these microwires can easily be assembled as laminate structures, they have potential applications as a cooling device for micro electro mechanical systems and nano electro mechanical systems.

Intent of Study on the Use of a Dual Airborne Laser Scanner (ALS) in Conjunction with a Tactical Grade Inertial Measurement Unit (IMU) for Unmanned Aerial Vehicle (UAV) Navigation and Mapping in Unknown, Non-Global Positioning System (GPS), Environments

DTIC Science & Technology

2006-08-05

ADDRESS(ES) 10. SPONSOR/MONITOR’S ACRONYM(S) AF Office of Scientific h Researc 875 N. Randolph St. Room 3112 11. SPONSOR/MONITOR’S REPORT...the process is often time-consuming and expensive. As the IMU market is experiencing a migration trend towards Micro Electro-Mechanical System (MEMS

Varifocal MOEMS fiber scanner for confocal endomicroscopy.

PubMed

Meinert, Tobias; Weber, Niklas; Zappe, Hans; Seifert, Andreas

2014-12-15

Based on an advanced silicon optical bench technology with integrated MOEMS (Micro-Opto-Electro-Mechanical-System) components, a piezo-driven fiber scanner for confocal microscopy has been developed. This highly-miniaturized technology allows integration into an endoscope with a total outer probe diameter of 2.5 mm. The system features a hydraulically-driven varifocal lens providing axial confocal scanning without any translational movement of components. The demonstrated resolutions are 1.7 μm laterally and 19 μm axially.

Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics

DOEpatents

Lopez, Daniel; Shenoy, Gopal; Wang, Jin; Walko, Donald A.; Jung, Il-Woong; Mukhopadhyay, Deepkishore

2016-08-09

A method and apparatus are provided for implementing Bragg-diffraction leveraged modulation of X-ray pulses using MicroElectroMechanical systems (MEMS) based diffractive optics. An oscillating crystalline MEMS device generates a controllable time-window for diffraction of the incident X-ray radiation. The Bragg-diffraction leveraged modulation of X-ray pulses includes isolating a particular pulse, spatially separating individual pulses, and spreading a single pulse from an X-ray pulse-train.

Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes

NASA Astrophysics Data System (ADS)

De Luca, A.; Cole, M. T.; Fasoli, A.; Ali, S. Z.; Udrea, F.; Milne, W. I.

2013-06-01

In this paper, we demonstrate a micro-inkjet printing technique as a reproducible post-process for the deposition of carbon nanoparticles and fullerene adlayers onto fully CMOS compatible micro-electro-mechanical silicon-on-insulator infrared (IR) light sources to enhance their infrared emission. We show experimentally a significant increase in the infrared emission efficiency of the coated emitters. We numerically validate these findings with models suggesting a dominant performance increase for wavelengths <5.5 μm. Here, the bimodal size distribution in the diameter of the carbon nanoparticles, relative to the fullerenes, is an effective mediator towards topologically enhanced emittance of our miniaturised emitters. A 90% improvement in IR emission power density has been shown which we have rationalised with an increase in the mean thickness of the deposited carbon nanoparticle adlayer.

[Micro Hadamard transform near-infrared spectrometer].

PubMed

Zhang, Zhi-hai; Muo, Xiang-xia; Guo, Yuan-jun; Wang, Wei

2011-07-01

A new type micro Hadamard transform (HT) near-infrared (NIR) spectrometer is proposed in the present paper. It has a MOEMS (Micro-Opto-Electro-Mechanical Systems) blazed grating HT mask. It has merits of compactness, agility of dynamic mask generation and high scan speed. The structure and theory of this spectrometer are analyzed. The 63-order Hadamard-S matrix and mask are designed. The mask is dynamically generated by program of MOEMS blazed gratings. The spectrum is in agreement with that measured by Shimadzu spectrometer in experiments. It has a wavelength range between 900 and 1 700 nm, spectral resolution of 19 nm, single scan time of 2.4 s, SNR of 44.67:1, optical path of 70 mm x 130 mm, and weight under 1 kg. It can meet the requirement of real time detection and portable application.

Design and fabrication of AlGaInP-based micro-light-emitting-diode array devices

NASA Astrophysics Data System (ADS)

Bao, Xingzhen; Liang, Jingqiu; Liang, Zhongzhu; Wang, Weibiao; Tian, Chao; Qin, Yuxin; Lü, Jinguang

2016-04-01

An integrated high-resolution (individual pixel size 80 μm×80 μm) solid-state self-emissive active matrix programmed with 320×240 micro-light-emitting-diode arrays structure was designed and fabricated on an AlGaInP semiconductor chip using micro electro-mechanical systems, microstructure and semiconductor fabricating techniques. Row pixels share a p-electrode and line pixels share an n-electrode. We experimentally investigated GaAs substrate thickness affects the electrical and optical characteristics of the pixels. For a 150-μm-thick GaAs substrate, the single pixel output power was 167.4 μW at 5 mA, and increased to 326.4 μW when current increase to 10 mA. The device investigated potentially plays an important role in many fields.

MOEMS Modeling Using the Geometrical Matrix Toolbox

NASA Technical Reports Server (NTRS)

Wilson, William C.; Atkinson, Gary M.

2005-01-01

New technologies such as MicroOptoElectro-Mechanical Systems (MOEMS) require new modeling tools. These tools must simultaneously model the optical, electrical, and mechanical domains and the interactions between these domains. To facilitate rapid prototyping of these new technologies an optical toolbox has been developed for modeling MOEMS devices. The toolbox models are constructed using MATLAB's dynamical simulator, Simulink. Modeling toolboxes will allow users to focus their efforts on system design and analysis as opposed to developing component models. This toolbox was developed to facilitate rapid modeling and design of a MOEMS based laser ultrasonic receiver system.

Synchrotron X-ray Microdiffraction Analysis of Proton Irradiated Polycrystalline Diamond Films

NASA Technical Reports Server (NTRS)

Newton, R. I.; Davidson, J. L.; Ice, G. E.; Liu, W.

2004-01-01

X-ray microdiffraction is a non-destructive technique that allows for depth-resolved, strain measurements with sub-micron spatial resolution. These capabilities make this technique promising for understanding the mechanical properties of MicroElectroMechanical Systems (MEMS). This investigation examined the local strain induced by irradiating a polycrystalline diamond thin film with a dose of 2x10(exp 17) H(+)per square centimeter protons. Preliminary results indicate that a measurable strain, on the order of 10(exp -3), was introduced into the film near the End of Range (EOR) region of the protons.

Temperature-dependent mechanical behavior of silicon dioxide, gold and gold-vanadium thin films for VLSI integrated circuits and MicroElectroMechanical systems (MEMs)

NASA Astrophysics Data System (ADS)

Lin, Ming-Tzer

The Semiconductor Industry has grown rapidly in the last twenty years. The national technology roadmap for semiconductors plans for developing the complexity and packing density of semiconductor devices into the next decade, allowing ever smaller and more densely packed structures to be fabricated. Recently, MEMS (Micro-Electro-Mechanical Systems) have become important in modern technology. The goal of MEMs is to integrate many types of miniature devices on a single chip, creating a new micro-world. The oxidation of silicon is one of the most important processes in semiconductor technology. Producing high-quality IC's and MEMS devices requires an understanding of the basic oxidation mechanism. In addition, for the reliability of IC's and MEMS devices, the mechanical properties of the oxide play a critical role. There has been an apparent convergence of opinion on the relevant mechanism leading to the "standard computational model" for stress effects on silicon oxidation. This model has recently become suspect. Most of the reasonably direct experimental data on the flow properties of SiO 2 thin film do not support a stress-dependent viscosity of the sort envisioned by the model. Gold and gold vanadium alloys are used in electrical interconnections and in radio frequency switch contacts for the semiconductor industry, MEMs sensors for the aerospace industry and also in brain probes by the bioelectronics mechanical industry. Despite the strong potential usage of gold and gold vanadium thin films at the small scale, very little is known about their mechanical properties. Our goal was to experimentally investigate stress and its influence on SiO2 thin films and the mechanical properties of gold and gold vanadium thin films at room temperature and at elevated temperature of different vanadium concentration. We found that the application of relatively small amounts of bending to an oxidizing silicon substrate leads to significant decreases in oxide thickness in the ultrathin oxide regime. Both tensile and compressive bending retard oxide growth, although compressive bending results in somewhat thinner oxides than does tensile bending. We also determined the modulus of gold and gold vanadium, and discovered that there is some evidence for a vanadium concentration dependence of the mechanical properties.

Mechanical performance of PPy helix tube microactuator

NASA Astrophysics Data System (ADS)

Bahrami Samani, Mehrdad; Spinks, Geoffrey M.; Cook, Christopher

2004-02-01

Conducting polymer actuators with favourable properties such as linearity, high power density and compliance are of increasing demand in micro applications. These materials generate forces over two times larger than produced by mammalian skeletal muscles. They operate to convert electro chemical energy to mechanical stress and strain. On the other hand, the application of conducting polymers is limited by the lack of a full description of the relation between four essential parameters: stress, strain, voltage and current. In this paper, polypyrrole helix tube micro actuator mechanical characteristics are investigated. The electrolyte is propylene carbonate and the dopant is TBA. PF6. The experiments are both in isotonic and isometric conditions and the input parameters are both electrical and mechanical. A dual mode force and length control and potentiostat / galvanostat are utilized for this purpose. Ultimately, the viscoelastic behaviour of the actuator is presented in this paper by a standard stress relaxation test. The effect of electrical stimulus on mechanical parameters is also explored by cyclic voltametry at different scan rates to obtain the best understanding of the actuation mechanism. The results demonstrate that the linear viscoelastic model, which performed well on conducting polymer film actuators, has to be modified to explain the mechanical behaviour of PPy helix tube fibre micro actuators. Secondly, the changes in mechanical properties of PPy need to be considered when modelling electromechanical behaviour.

High Stability Induced by the TiN/Ti Interlayer in Three-Dimensional Si/Ge Nanorod Arrays as Anode in Micro Lithium Ion Battery.

PubMed

Yue, Chuang; Yu, Yingjian; Wu, Zhenguo; Sun, Shibo; He, Xu; Li, Juntao; Zhao, Libo; Wu, Suntao; Li, Jing; Kang, Junyong; Lin, Liwei

2016-03-01

Three-dimensional (3D) Si/Ge-based micro/nano batteries are promising lab-on-chip power supply sources because of the good process compatibility with integrated circuits and Micro/Nano-Electro-Mechanical System technologies. In this work, the effective interlayer of TiN/Ti thin films were introduced to coat around the 3D Si nanorod (NR) arrays before the amorphous Ge layer deposition as anode in micro/nano lithium ion batteries, thus the superior cycling stability was realized by reason for the restriction of Si activation in this unique 3D matchlike Si/TiN/Ti/Ge NR array electrode. Moreover, the volume expansion properties after the repeated lithium-ion insertion/extraction were experimentally investigated to evidence the superior stability of this unique multilayered Si composite electrode. The demonstration of this wafer-scale, cost-effective, and Si-compatible fabrication for anodes in Li-ion micro/nano batteries provides new routes to configurate more efficient 3D energy storage systems for micro/nano smart semiconductor devices.

Microfluidic System Simulation Including the Electro-Viscous Effect

NASA Technical Reports Server (NTRS)

Rojas, Eileen; Chen, C. P.; Majumdar, Alok

2007-01-01

This paper describes a practical approach using a general purpose lumped-parameter computer program, GFSSP (Generalized Fluid System Simulation Program) for calculating flow distribution in a network of micro-channels including electro-viscous effects due to the existence of electrical double layer (EDL). In this study, an empirical formulation for calculating an effective viscosity of ionic solutions based on dimensional analysis is described to account for surface charge and bulk fluid conductivity, which give rise to electro-viscous effect in microfluidics network. Two dimensional slit micro flow data was used to determine the model coefficients. Geometry effect is then included through a Poiseuille number correlation in GFSSP. The bi-power model was used to calculate flow distribution of isotropically etched straight channel and T-junction microflows involving ionic solutions. Performance of the proposed model is assessed against experimental test data.

Optical MEMS for earth observation payloads

NASA Astrophysics Data System (ADS)

Rodrigues, B.; Lobb, D. R.; Freire, M.

2017-11-01

An ESA study has been taken by Lusospace Ltd and Surrey Satellite Techonoly Ltd (SSTL) into the use of optical Micro Eletro-Mechanical Systems (MEMS) for earth Observation. A review and analysis was undertaken of the Micro-Optical Electro-Mechanical Systems (MOEMS) available in the market with potential application in systems for Earth Observation. A summary of this review will be presented. Following the review two space-instrument design concepts were selected for more detailed analysis. The first was the use of a MEMS device to remove cloud from Earth images. The concept is potentially of interest for any mission using imaging spectrometers. A spectrometer concept was selected and detailed design aspects and benefits evaluated. The second concept developed uses MEMS devices to control the width of entrance slits of spectrometers, to provide variable spectral resolution. This paper will present a summary of the results of the study.

Focusing light through dynamical samples using fast continuous wavefront optimization.

PubMed

Blochet, B; Bourdieu, L; Gigan, S

2017-12-01

We describe a fast continuous optimization wavefront shaping system able to focus light through dynamic scattering media. A micro-electro-mechanical system-based spatial light modulator, a fast photodetector, and field programmable gate array electronics are combined to implement a continuous optimization of a wavefront with a single-mode optimization rate of 4.1 kHz. The system performances are demonstrated by focusing light through colloidal solutions of TiO 2 particles in glycerol with tunable temporal stability.

Micro/nano electro mechanical systems for practical applications

NASA Astrophysics Data System (ADS)

Esashi, Masayoshi

2009-09-01

Silicon MEMS as electrostatically levitated rotational gyroscope, 2D optical scanner and wafer level packaged devices as integrated capacitive pressure sensor and MEMS switch are described. MEMS which use non-silicon materials as diamond, PZT, conductive polymer, CNT (carbon nano tube), LTCC with electrical feedthrough, SiC (silicon carbide) and LiNbO3 for multi-probe data storage, multi-column electron beam lithography system, probe card for wafer-level burn-in test, mould for glass press moulding and SAW wireless passive sensor respectively are also described.

Control of solid-state lasers using an intra-cavity MEMS micromirror.

PubMed

Lubeigt, Walter; Gomes, Joao; Brown, Gordon; Kelly, Andrew; Savitski, Vasili; Uttamchandani, Deepak; Burns, David

2011-01-31

High reflectivity, electrothermal and electrostatic MEMS (Micro-Electro-Mechanical Systems) micromirrors were used as a control element within a Nd-doped laser cavity. Stable continuous-wave oscillation of a 3-mirror Nd:YLF laser at a maximum output power of 200 mW was limited by thermally-induced surface deformation of the micromirror. An electrostatic micromirror was used to induce Q-switching, resulting in pulse durations of 220 ns - 2 μs over a repetition frequency range of 6 kHz - 40 kHz.

A Method for Testing the Dynamic Accuracy of Micro-Electro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) Sensors for Inertial Navigation Systems (INS) and Human Motion Tracking Applications

DTIC Science & Technology

2010-06-01

32 2. Low-Cost Framework........................................................................33 3. Low Magnetic Field ...that have a significant impact on the magnetic field measured by a MARG, which could potentially add errors that are due entirely to the test...minimize the impact on the local magnetic field , and the apparatus was made as rigidly as possible using 2 x 4s to minimize any out of plane motions that

Uncovering the Fundamental Nature of Tribological Interfaces: High Resolution Tribology and Spectroscopy of Ultrahard Nanostructured Diamond Films for MEMS and Beyond

DTIC Science & Technology

2007-12-31

Wisconsin-Madison) for 2? ol !> o "S \\ % M 31 Statement of Objectives The original objectives of the proposal were as follows: 1. Obtain high-quality...performed multiple PEEM experiments on wear tracks on carbon-based films and polysilicon micro-electro mechanical systems (MEMS) devices, a comprehensive... polysilicon MEMS device known as the "nanotractor", and studies of the structure and composition of UNCD, ta-C, and nanocrystalline diamond (NCD) films. They

Micro spectrometer for parallel light and method of use

NASA Technical Reports Server (NTRS)

Park, Yeonjoon (Inventor); Choi, Sang H. (Inventor); King, Glen C. (Inventor); Elliott, James R. (Inventor)

2011-01-01

A spectrometer system includes an optical assembly for collimating light, a micro-ring grating assembly having a plurality of coaxially-aligned ring gratings, an aperture device defining an aperture circumscribing a target focal point, and a photon detector. An electro-optical layer of the grating assembly may be electrically connected to an energy supply to change the refractive index of the electro-optical layer. Alternately, the gratings may be electrically connected to the energy supply and energized, e.g., with alternating voltages, to change the refractive index. A data recorder may record the predetermined spectral characteristic. A method of detecting a spectral characteristic of a predetermined wavelength of source light includes generating collimated light using an optical assembly, directing the collimated light onto the micro-ring grating assembly, and selectively energizing the micro-ring grating assembly to diffract the predetermined wavelength onto the target focal point, and detecting the spectral characteristic using a photon detector.

High speed micro scanner for 3D in-volume laser micro processing

NASA Astrophysics Data System (ADS)

Schaefer, D.; Gottmann, J.; Hermans, M.; Ortmann, J.; Kelbassa, I.

2013-03-01

Using an in-house developed micro scanner three-dimensional micro components and micro fluidic devices in fused silica are realized using the ISLE process (in-volume selective laser-induced etching). With the micro scanner system the potential of high average power femtosecond lasers (P > 100 W) is exploited by the fabrication of components with micrometer precision at scan speeds of several meters per second. A commercially available galvanometer scanner is combined with an acousto-optical and/or electro-optical beam deflector and translation stages. For focusing laser radiation high numerical aperture microscope objectives (NA > 0.3) are used generating a focal volume of a few cubic micrometers. After laser exposure the materials are chemically wet etched in aqueous solution. The laser-exposed material is etched whereas the unexposed material remains nearly unchanged. Using the described technique called ISLE the fabrication of three-dimensional micro components, micro holes, cuts and channels is possible with high average power femtosecond lasers resulting in a reduced processing time for exposure. By developing the high speed micro scanner up-scaling of the ISLE process is demonstrated. The fabricated components made out of glass can be applied in various markets like biological and medical diagnostics as well as in micro mechanics.

Novel scanning electron microscope bulge test technique integrated with loading function

DOE Office of Scientific and Technical Information (OSTI.GOV)

Li, Chuanwei; Xie, Huimin, E-mail: liuzw@bit.edu.cn, E-mail: xiehm@mail.tsinghua.edu.cn; Liu, Zhanwei, E-mail: liuzw@bit.edu.cn, E-mail: xiehm@mail.tsinghua.edu.cn

2014-10-15

Membranes and film-on-substrate structures are critical elements for some devices in electronics industry and for Micro Electro Mechanical Systems devices. These structures are normally at the scale of micrometer or even nanometer. Thus, the measurement for the mechanical property of these membranes poses a challenge over the conventional measurements at macro-scales. In this study, a novel bulge test method is presented for the evaluation of mechanical property of micro thin membranes. Three aspects are discussed in the study: (a) A novel bulge test with a Scanning Electron Microscope system realizing the function of loading and measuring simultaneously; (b) a simplifiedmore » Digital Image Correlation method for a height measurement; and (c) an imaging distortion correction by the introduction of a scanning Moiré method. Combined with the above techniques, biaxial modulus as well as Young's modulus of the polyimide film can be determined. Besides, a standard tensile test is conducted as an auxiliary experiment to validate the feasibility of the proposed method.« less

Micro- and nanostructured electro-active polymer actuators as smart muscles for incontinence treatment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Osmani, Bekim, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Töpper, Tino, E-mail: bekim.osmani@unibas.ch, E-mail: tino.toepper@unibas.ch; Weiss, Florian M., E-mail: vanessa.leung@unibas.ch, E-mail: bert.mueller@unibas.ch

2015-02-17

Treatments of severe incontinence are currently based on purely mechanical systems that generally result in revision after three to five years. Our goal is to develop a prototype acting in a natural-analogue manner as artificial muscle, which is based on electro-active polymers. Dielectric actuators have outstanding performances including millisecond response times, mechanical strains of more than 10 % and power to mass densities similar to natural muscles. They basically consist of polymer films sandwiched between two compliant electrodes. The incompressible but elastic polymer film transduces the electrical energy into mechanical work according to the Maxwell pressure. Available polymer films aremore » micrometers thick and voltages as large as kV are necessary to obtain 10 % strain. For medical implants, polymer films should be nanometer thin to realize actuation below 48 V. The metallic electrodes have to be stretchable to follow the strain of 10 % and remain conductive. Recent results on the stress/strain behavior of anisotropic EAP-cantilevers have shown dependencies on metal electrode preparation. We have investigated tunable anisotropic micro- and nanostructures for metallic electrodes. They show a preferred actuation direction with improved stress-strain behavior. The bending of the cantilever has been characterized by the laser beam deflection method. The impact of the electrode on the effective Young's Modulus is measured using an Ultra Nanoindentation Tester with an integrated reference system for soft polymer surfaces. Once ten thousand layers of nanometer-thin EAP actuators are available, devices beyond the envisioned application will flood the market.« less

Contributed Review: Experimental characterization of inverse piezoelectric strain in GaN HEMTs via micro-Raman spectroscopy

NASA Astrophysics Data System (ADS)

Bagnall, Kevin R.; Wang, Evelyn N.

2016-06-01

Micro-Raman thermography is one of the most popular techniques for measuring local temperature rise in gallium nitride (GaN) high electron mobility transistors with high spatial and temporal resolution. However, accurate temperature measurements based on changes in the Stokes peak positions of the GaN epitaxial layers require properly accounting for the stress and/or strain induced by the inverse piezoelectric effect. It is common practice to use the pinched OFF state as the unpowered reference for temperature measurements because the vertical electric field in the GaN buffer that induces inverse piezoelectric stress/strain is relatively independent of the gate bias. Although this approach has yielded temperature measurements that agree with those derived from the Stokes/anti-Stokes ratio and thermal models, there has been significant difficulty in quantifying the mechanical state of the GaN buffer in the pinched OFF state from changes in the Raman spectra. In this paper, we review the experimental technique of micro-Raman thermography and derive expressions for the detailed dependence of the Raman peak positions on strain, stress, and electric field components in wurtzite GaN. We also use a combination of semiconductor device modeling and electro-mechanical modeling to predict the stress and strain induced by the inverse piezoelectric effect. Based on the insights gained from our electro-mechanical model and the best values of material properties in the literature, we analyze changes in the E2 high and A1 (LO) Raman peaks and demonstrate that there are major quantitative discrepancies between measured and modeled values of inverse piezoelectric stress and strain. We examine many of the hypotheses offered in the literature for these discrepancies but conclude that none of them satisfactorily resolves these discrepancies. Further research is needed to determine whether the electric field components could be affecting the phonon frequencies apart from the inverse piezoelectric effect in wurtzite GaN, which has been predicted theoretically in zinc blende gallium arsenide (GaAs).

Mechanical and Electronic Approaches to Improve the Sensitivity of Microcantilever Sensors

PubMed Central

Mutyala, Madhu Santosh Ku; Bandhanadham, Deepika; Pan, Liu; Pendyala, Vijaya Rohini; Ji, Hai-Feng

2010-01-01

Advances in the field of Micro Electro Mechanical Systems (MEMS) and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free biosensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of microcantilever (MCL) sensors. PMID:20975987

Biomimetic patterned surfaces for controllable friction in micro- and nanoscale devices

NASA Astrophysics Data System (ADS)

Singh, Arvind; Suh, Kahp-Yang

2013-12-01

Biomimetics is the study and simulation of biological systems for desired functional properties. It involves the transformation of underlying principles discovered in nature into man-made technologies. In this context, natural surfaces have significantly inspired and motivated new solutions for micro- and nano-scale devices (e.g., Micro/Nano-Electro-Mechanical Systems, MEMS/NEMS) towards controllable friction, during their operation. As a generic solution to reduce friction at small scale, various thin films/coatings have been employed in the last few decades. In recent years, inspiration from `Lotus Effect' has initiated a new research direction for controllable friction with biomimetic patterned surfaces. By exploiting the intrinsic hydrophobicity and ability to reduce contact area, such micro- or nano-patterned surfaces have demonstrated great strength and potential for applications in MEMS/NEMS devices. This review highlights recent advancements on the design, development and performance of these biomimetic patterned surfaces. Also, we present some hybrid approaches to tackle current challenges in biomimetic tribological applications for MEMS/NEMS devices.

Thermoelastic damping effect of the micro-ring resonator with irregular mass and stiffness

NASA Astrophysics Data System (ADS)

Kim, Jung-Hwan; Kim, Ji-Hwan

2016-05-01

Fundamentally, vibration characteristic is a main factor for the stability of structures. In this regard, the irregularity of mass and stiffness distributions for the structure have been an interesting issue for many years. Recently, the Micro Electro Mechanical Systems (MEMS) are developed for various applications such as gyro sensors. In the present work, in-plane vibration of micro-ring structure with multiple finite-sized imperfections is investigated. Then, the unbalance of the structure is represented using Heaviside Step Function for the inextensional modeling of the ring. Also, thermoelastic damping (TED) due to internal friction is studied based on Fourier's one-dimensional heat conduction equation using Laplace Transform. To obtain the quality-factors (Q-factors) for imperfect micro-ring, analytical solutions are calculated from governing equations of motion with TED. And then, the natural frequencies and the Q-factors are observed to separate into lower and higher modes. Additionally, the vibration mode shapes are presented, and the frequency trimming concept due to attached imperfections is investigated.

The Electrophysiological MEMS Device with Micro Channel Array for Cellular Network Analysis

NASA Astrophysics Data System (ADS)

Tonomura, Wataru; Kurashima, Toshiaki; Takayama, Yuzo; Moriguchi, Hiroyuki; Jimbo, Yasuhiko; Konishi, Satoshi

This paper describes a new type of MCA (Micro Channel Array) for simultaneous multipoint measurement of cellular network. Presented MCA employing the measurement principles of the patch-clamp technique is designed for advanced neural network analysis which has been studied by co-authors using 64ch MEA (Micro Electrode Arrays) system. First of all, sucking and clamping of cells through channels of developed MCA is expected to improve electrophysiological signal detections. Electrophysiological sensing electrodes integrated around individual channels of MCA by using MEMS (Micro Electro Mechanical System) technologies are electrically isolated for simultaneous multipoint measurement. In this study, we tested the developed MCA using the non-cultured rat's cerebral cortical slice and the hippocampal neurons. We could measure the spontaneous action potential of the slice simultaneously at multiple points and culture the neurons on developed MCA. Herein, we describe the experimental results together with the design and fabrication of the electrophysiological MEMS device with MCA for cellular network analysis.

Image Registration for Stability Testing of MEMS

NASA Technical Reports Server (NTRS)

Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

2011-01-01

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

Micro-pyramidal structure fabrication on polydimethylsiloxane (PDMS) by Si (100) KOH wet etching

NASA Astrophysics Data System (ADS)

Hwang, Shinae; Lim, Kyungsuk; Shin, Hyeseon; Lee, Seongjae; Jang, Moongyu

2017-10-01

A high degree of accuracy in bulk micromachining is essential to fabricate micro-electro-mechanical systems (MEMS) devices. A series of etching experiments is carried out using 40 wt% KOH solutions at the constant temperature of 70 °C. Before wet etching, SF6 and O2 are used as the dry etching gas to etch the masking layers of a 100 nm thick Si3N4 and SiO2, respectively. The experimental results indicate that (100) silicon wafer form the pyramidal structures with (111) single crystal planes. All the etch profiles are analyzed using Scanning Electron Microscope (SEM) and the wet etch rates depend on the opening sizes. The manufactured pyramidal structures are used as the pattern of silicon mold. After a short hardening of coated polydimethylsiloxane (PDMS) layer, micro pyramidal structures are easily transferred to PDMS layer.

In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor

PubMed Central

Lee, Chi-Yuan; Weng, Fang-Bor; Kuo, Yzu-Wei; Tsai, Chao-Hsuan; Cheng, Yen-Ting; Cheng, Chih-Kai; Lin, Jyun-Ting

2016-01-01

In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and nonuniform fuel distribution, thus influencing the performance and lifetime of the fuel cell stack. In this paper micro-electro-mechanical systems (MEMS) are utilized to develop a high-temperature electrochemical environment-resistant five-in-one micro-sensor embedded in the cathode channel plate of an HT-PEMFC stack, and materials and process parameters are appropriately selected to protect the micro-sensor against failure or destruction during long-term operation. In-situ measurement of the local temperature, voltage, pressure, flow and current distributions in the HT-PEMFC stack is carried out. This integrated micro-sensor has five functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and the goal is being able to be put in any place for measurement without affecting the performance of the battery. PMID:27763559

In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor.

PubMed

Lee, Chi-Yuan; Weng, Fang-Bor; Kuo, Yzu-Wei; Tsai, Chao-Hsuan; Cheng, Yen-Ting; Cheng, Chih-Kai; Lin, Jyun-Ting

2016-10-18

In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and nonuniform fuel distribution, thus influencing the performance and lifetime of the fuel cell stack. In this paper micro-electro-mechanical systems (MEMS) are utilized to develop a high-temperature electrochemical environment-resistant five-in-one micro-sensor embedded in the cathode channel plate of an HT-PEMFC stack, and materials and process parameters are appropriately selected to protect the micro-sensor against failure or destruction during long-term operation. In-situ measurement of the local temperature, voltage, pressure, flow and current distributions in the HT-PEMFC stack is carried out. This integrated micro-sensor has five functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and the goal is being able to be put in any place for measurement without affecting the performance of the battery.

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

NASA Astrophysics Data System (ADS)

Han, Maeum; Keon Kim, Jae; Kong, Seong Ho; Kang, Shin-Won; Jung, Daewoong

2018-06-01

This paper reports a micro-electro-mechanical-system (MEMS)-based tilt sensor using air medium. Since the working mechanism of the sensor is the thermal convection in a sealed chamber, structural parameters that can affect thermal convection must be considered to optimize the performance of the sensor. This paper presents the experimental results that were conducted by optimizing several parameters such as the heater geometry, input power and cavity volume. We observed that an increase in the heating power and cavity volume can improve the sensitivity, and heater geometry plays important role in performance of the sensor.

A chip-scale integrated cavity-electro-optomechanics platform.

PubMed

Winger, M; Blasius, T D; Mayer Alegre, T P; Safavi-Naeini, A H; Meenehan, S; Cohen, J; Stobbe, S; Painter, O

2011-12-05

We present an integrated optomechanical and electromechanical nanocavity, in which a common mechanical degree of freedom is coupled to an ultrahigh-Q photonic crystal defect cavity and an electrical circuit. The system allows for wide-range, fast electrical tuning of the optical nanocavity resonances, and for electrical control of optical radiation pressure back-action effects such as mechanical amplification (phonon lasing), cooling, and stiffening. These sort of integrated devices offer a new means to efficiently interconvert weak microwave and optical signals, and are expected to pave the way for a new class of micro-sensors utilizing optomechanical back-action for thermal noise reduction and low-noise optical read-out.

Assessment of nanosystems for space applications

NASA Astrophysics Data System (ADS)

Bilhaut, Lise; Duraffourg, Laurent

2009-11-01

This paper first gives an overview of the applications of micro-electro-mechanical systems (MEMS) in space. Microsystems are advertised for their extremely low size and mass, along with their low power consumption and in some case their improved performances. Examples of actual flown MEMS and future missions relying on MEMS are given. Microsystems are now enjoying a dynamic and expanding interest in the space community. This paper intends to give an idea about the next step in miniaturization, since the microelectronic industry is already looking at nano-electro-mechanical systems (NEMS) driven by the more-than-Moore philosophy. We show that the impact of nanosystems should not be reduced at a homothecy in size, weight and power consumption. New forces appear at this scale (Casimir force…) which have to be considered in the system design. The example of a nano-mechanical memory is developed. We also show that performances of nanosystems are not systematically better than their microscopic counterparts through the study of the impact of dimension reduction on an accelerometer resolution and sensitivity. We conclude with the idea that nanosystems will find their greatest applications in distributed intelligent networks that will allow new mission concepts for space exploration.

Sub-Grid Modeling of Electrokinetic Effects in Micro Flows

NASA Technical Reports Server (NTRS)

Chen, C. P.

2005-01-01

Advances in micro-fabrication processes have generated tremendous interests in miniaturizing chemical and biomedical analyses into integrated microsystems (Lab-on-Chip devices). To successfully design and operate the micro fluidics system, it is essential to understand the fundamental fluid flow phenomena when channel sizes are shrink to micron or even nano dimensions. One important phenomenon is the electro kinetic effect in micro/nano channels due to the existence of the electrical double layer (EDL) near a solid-liquid interface. Not only EDL is responsible for electro-osmosis pumping when an electric field parallel to the surface is imposed, EDL also causes extra flow resistance (the electro-viscous effect) and flow anomaly (such as early transition from laminar to turbulent flow) observed in pressure-driven microchannel flows. Modeling and simulation of electro-kinetic effects on micro flows poses significant numerical challenge due to the fact that the sizes of the double layer (10 nm up to microns) are very thin compared to channel width (can be up to 100 s of m). Since the typical thickness of the double layer is extremely small compared to the channel width, it would be computationally very costly to capture the velocity profile inside the double layer by placing sufficient number of grid cells in the layer to resolve the velocity changes, especially in complex, 3-d geometries. Existing approaches using "slip" wall velocity and augmented double layer are difficult to use when the flow geometry is complicated, e.g. flow in a T-junction, X-junction, etc. In order to overcome the difficulties arising from those two approaches, we have developed a sub-grid integration method to properly account for the physics of the double layer. The integration approach can be used on simple or complicated flow geometries. Resolution of the double layer is not needed in this approach, and the effects of the double layer can be accounted for at the same time. With this approach, the numeric grid size can be much larger than the thickness of double layer. Presented in this report are a description of the approach, methodology for implementation and several validation simulations for micro flows.

Evaluation of a Programmable Voltage-Controlled MEMS Oscillator, Type SiT3701, Over a Wide Temperature Range

NASA Technical Reports Server (NTRS)

Patterson, Richard; Hammoud, Ahmad

2009-01-01

Semiconductor chips based on MEMS (Micro-Electro-Mechanical Systems) technology, such as sensors, transducers, and actuators, are becoming widely used in today s electronics due to their high performance, low power consumption, tolerance to shock and vibration, and immunity to electro-static discharge. In addition, the MEMS fabrication process allows for the miniaturization of individual chips as well as the integration of various electronic circuits into one module, such as system-on-a-chip. These measures would simplify overall system design, reduce parts count and interface, improve reliability, and reduce cost; and they would meet requirements of systems destined for use in space exploration missions. In this work, the performance of a recently-developed MEMS voltage-controlled oscillator was evaluated under a wide temperature range. Operation of this new commercial-off-the-shelf (COTS) device was also assessed under thermal cycling to address some operational conditions of the space environment

About “SI” Traceability of Micromasses And/or Microforces

NASA Astrophysics Data System (ADS)

Vâlcu, Adriana; Ştefănescu, Dan Mihai

Over the last period, increasing attention has been paid to measurement of small forces which play a more important role in nanotechnology and other significant areas such as MEMS (Micro-Electro-Mechanical Systems) and NEMS (nano-electro-mechanical systems) which can be found into everyday products (mobile phones, MP3 players, PCs, cars). In this respect, the development of mass standards and measurement techniques below the current limit of 1 milligram is vital to provide traceability to the SI for such measurements. In Romania, the Mass laboratory of INM considered it necessary to extend the dissemination of the mass unit below 1 mg, in order to meet current needs. Using the subdivision method and starting from the national prototype kilogram No. 2, all necessary experiments were performed for the first time in Romania to extend mass unit traceability till 100 μg. This extension also supports the provision of mass calibrations for low force measurements. The associated measurement procedure and measurement uncertainty results obtained in the calibration are described. In the article are also presented some of the worldwide methods currently used for measuring small forces.

A novel bio-electrochemical system with sand/activated carbon separator, Al anode and bio-anode integrated micro-electrolysis/electro-flocculation cost effectively treated high load wastewater with energy recovery.

PubMed

Gao, Changfei; Liu, Lifen; Yang, Fenglin

2018-02-01

A novel bio-electrochemical system (BES) was developed by integrating micro-electrolysis/electro-flocculation from attaching a sacrificing Al anode to the bio-anode, it effectively treated high load wastewater with energy recovery (maximum power density of 365.1 mW/m 3 and a maximum cell voltage of 0.97 V), and achieving high removals of COD (>99.4%), NH 4 + -N (>98.7%) and TP (>98.6%). The anode chamber contains microbes, activated carbon (AC)/graphite granules and Al anode. It was separated from the cathode chamber containing bifunctional catalytic and filtration membrane cathode (loaded with Fe/Mn/C/F/O catalyst) by a multi-medium chamber (MMC) filled with manganese sand and activated carbon granules, which replaced expensive PEM and reduced cost. An air contact oxidation bed for aeration was still adopted before liquid entering the cathode chamber. micro-electrolysis/electro-flocculation helps in achieving high removal efficiencies and contributes to membrane fouling migration. The increase of activated carbon in the separator MMC increased power generation and reduced system electric resistance. Copyright © 2017 Elsevier Ltd. All rights reserved.

Transport of magneto-nanoparticles during electro-osmotic flow in a micro-tube in the presence of magnetic field for drug delivery application

NASA Astrophysics Data System (ADS)

Mondal, A.; Shit, G. C.

2017-11-01

In this paper, we have examined the motion of magnetic-nanoparticles and the flow characteristics of biofluid in a micro-tube in the presence of externally applied magnetic field and electrokinetic effects. In the drug delivery system, the motion of the magnetic nanoparticles as carriers is important for therapeutic procedure in the treatment of tumor cells, infections and removing blood clots. The unidirectional electro-osmotic flow of biofluid is driven by the combined effects of pulsatile pressure gradient and electrokinetic force. The governing equation for unsteady electromagnetohydrodynamic flow subject to the no-slip boundary condition has been solved numerically by using Crank-Nicolson implicit finite difference scheme. We have analyzed the variation of axial velocity, velocity distribution of magnetic nanoparticles, volumetric flow rate and wall shear stress for various values of the non-dimensional parameters. The study reveals that blood flow velocity, carriers velocity and flow rate are strongly influenced by the electro-osmotic parameter as well as the Hartmann number. The particle mass parameter as well as the particle concentration parameter have efficient capturing effect on magnetic nanoparticles during blood flow through a micro-tube for drug delivery.

Reconfigurable electro-optical directed-logic circuit using carrier-depletion micro-ring resonators.

PubMed

Qiu, Ciyuan; Gao, Weilu; Soref, Richard; Robinson, Jacob T; Xu, Qianfan

2014-12-15

Here we demonstrate a reconfigurable electro-optical directed-logic circuit based on a regular array of integrated optical switches. Each 1×1 optical switch consists of a micro-ring resonator with an embedded lateral p-n junction and a micro-heater. We achieve high-speed on-off switching by applying electrical logic signals to the p-n junction. We can configure the operation mode of each switch by thermal tuning the resonance wavelength. The result is an integrated optical circuit that can be reconfigured to perform any combinational logic operation. As a proof-of-principle, we fabricated a multi-spectral directed-logic circuit based on a fourfold array of switches and showed that this circuit can be reconfigured to perform arbitrary two-input logic functions with speeds up to 3  GB/s.

Electro-thermal modelling of anode and cathode in micro-EDM

NASA Astrophysics Data System (ADS)

Yeo, S. H.; Kurnia, W.; Tan, P. C.

2007-04-01

Micro-electrical discharge machining is an evolution of conventional EDM used for fabricating three-dimensional complex micro-components and microstructure with high precision capabilities. However, due to the stochastic nature of the process, it has not been fully understood. This paper proposes an analytical model based on electro-thermal theory to estimate the geometrical dimensions of micro-crater. The model incorporates voltage, current and pulse-on-time during material removal to predict the temperature distribution on the workpiece as a result of single discharges in micro-EDM. It is assumed that the entire superheated area is ejected from the workpiece surface while only a small fraction of the molten area is expelled. For verification purposes, single discharge experiments using RC pulse generator are performed with pure tungsten as the electrode and AISI 4140 alloy steel as the workpiece. For the pulse-on-time range up to 1000 ns, the experimental and theoretical results are found to be in close agreement with average volume approximation errors of 2.7% and 6.6% for the anode and cathode, respectively.

Hierarchical nano-on-micro copper with enhanced catalytic activity towards electro-oxidation of hydrazine

NASA Astrophysics Data System (ADS)

Yan, Xiaodong; Liu, Yuan; Scheel, Kyle R.; Li, Yong; Yu, Yunhua; Yang, Xiaoping; Peng, Zhonghua

2018-03-01

The electrochemical properties of catalyst materials are highly dependent on the materials structure and architecture. Herein, nano-on-micro Cu electrodes are fabricated by growing Cu microcrystals on Ni foam substrate, followed by introducing Cu nanocrystals onto the surface of the Cu microcrystals. The introduction of Cu nanocrystals onto the surface of Cu microcrystals is shown to dramatically increase the electrochemically active surface area and thus significantly enhances the catalytic activity of the catalyst electrode towards electro-oxidation of hydrazine. The onset potential (-1.04 V vs. Ag/AgCl) of the nano-on-micro Cu electrode is lower than those of the reported Cu-based catalysts under similar testing conditions, and a current density of 16 mA·cm-2, which is 2 times that of the microsized Cu electrode, is achieved at a potential of -0.95 V vs. Ag/AgCl. Moreover, the nano-on-micro Cu electrode demonstrates good long-term stability.

Fabrication of CuO-Pt core-shell nanohooks by in situ reconstructing the Pt-shells.

PubMed

Cao, Fan; Zheng, He; Zhao, Ligong; Huang, Rui; Jia, Shuangfeng; Liu, Huihui; Li, Lei; Wang, Zhao; Hu, Yongming; Gu, Haoshuang; Wang, Jianbo

2018-05-25

The design of various nanostructures with specific compositions and shapes is highly demanded due to the widespread use of micro/nano electro-mechanical systems. In this work, one-dimensional CuO-Pt core-shell nanowires (NWs) are acquired by depositing Pt nanoparticles onto CuO NWs and then mechanically-shaped into nanohooks. Subsequently, the hook-like shape is maintained by the Pt-shell which is reconstructed via Joule heat and re-solidified after cooling down, during which the elastic strain energy is stored in the CuO-core. The results provide a simple strategy to design nanostructures with various compositions and shapes, implying the potential applications in mechanical energy storage and shape memory nanodevices.

Fabrication of CuO–Pt core–shell nanohooks by in situ reconstructing the Pt-shells

NASA Astrophysics Data System (ADS)

Cao, Fan; Zheng, He; Zhao, Ligong; Huang, Rui; Jia, Shuangfeng; Liu, Huihui; Li, Lei; Wang, Zhao; Hu, Yongming; Gu, Haoshuang; Wang, Jianbo

2018-05-01

The design of various nanostructures with specific compositions and shapes is highly demanded due to the widespread use of micro/nano electro-mechanical systems. In this work, one-dimensional CuO–Pt core–shell nanowires (NWs) are acquired by depositing Pt nanoparticles onto CuO NWs and then mechanically-shaped into nanohooks. Subsequently, the hook-like shape is maintained by the Pt-shell which is reconstructed via Joule heat and re-solidified after cooling down, during which the elastic strain energy is stored in the CuO-core. The results provide a simple strategy to design nanostructures with various compositions and shapes, implying the potential applications in mechanical energy storage and shape memory nanodevices.

Nanoscale friction properties of graphene and graphene oxide

DOE PAGES

Berman, Diana; Erdemir, Ali; Zinovev, Alexander V.; ...

2015-04-03

Achieving superlow friction and wear at the micro/nano-scales through the uses of solid and liquid lubricants may allow superior performance and long-lasting operations in a range of micromechanical system including micro-electro mechanical systems (MEMS). Previous studies have indicated that conventional solid lubricants such as highly ordered pyrolitic graphite (HOPG) can only afford low friction in humid environments at micro/macro scales; but, HOPG is not suitable for practical micro-scale applications. Here, we explored the nano-scale frictional properties of multi-layered graphene films as a potential solid lubricant for such applications. Atomic force microscopy (AFM) measurements have revealed that for high-purity multilayered graphenemore » (7–9 layers), the friction force is significantly lower than what can be achieved by the use of HOPG, regardless of the counterpart AFM tip material. We have demonstrated that the quality and purity of multilayered graphene plays an important role in reducing lateral forces, while oxidation of graphene results in dramatically increased friction values. Furthermore, for the first time, we demonstrated the possibility of achieving ultralow friction for CVD grown single layer graphene on silicon dioxide. This confirms that the deposition process insures a stronger adhesion to substrate and hence enables superior tribological performance than the previously reported mechanical exfoliation processes.« less

Dual-Fiberoptic Microcantilever Proximity Sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goedeke, S.M.

2001-08-08

Microcantilevers are key components of many Micro-Electro-Mechanical Systems (MEMS) and Micro-Optical-Electro-Mechanical Systems (MOEMS) because slight changes to them physically or chemically lead to changes in mechanical characteristics. An inexpensive dual-fiberoptic microcantilever proximity sensor and model to predict its performance are reported here. Motion of a magnetic-material-coated cantilever is the basis of a system under development for measuring magnetic fields. The dual fiber proximity sensor will be used to monitor the motion of the cantilever. The specific goal is to sense induction fields produced by a current carrying conductor. The proximity sensor consists of two fibers side by side with claddingsmore » in contact. The fiber core diameter, 50 microns, and cladding thickness, 10 microns, are as small as routinely available commercially with the exception of single mode fiber. Light is launched into one fiber from a light-emitting diode (LED). It emerges from that fiber and reflects from the cantilever into the adjacent receiving fiber connected to a detector. The sensing end is cast molded with a diameter of 3-mm over the last 20-mm, yielding a low profile sensor. This reflective triangulation approach is probably the oldest and simplest fiber proximity sensing approach, yet the novelty here is in demonstrating high sensitivity at low expense from a triangular microstructure with amorphous magnetic coatings of iron, cobalt, permalloy, etc. The signal intensity versus distance curve yields an approximate gaussian shape. For a typical configuration, the signal grows from 10% to 90% of maximum in traversing from 6 to 50 microns from a coated cantilever. With signal levels exceeding a volt, nanometer resolution should be readily achievable for periodic signals.« less

A bio-inspired real-time capable artificial lateral line system for freestream flow measurements.

PubMed

Abels, C; Qualtieri, A; De Vittorio, M; Megill, W M; Rizzi, F

2016-06-03

To enhance today's artificial flow sensing capabilities in aerial and underwater robotics, future robots could be equipped with a large number of miniaturized sensors distributed over the surface to provide high resolution measurement of the surrounding fluid flow. In this work we show a linear array of closely separated bio-inspired micro-electro-mechanical flow sensors whose sensing mechanism is based on a piezoresistive strain-gauge along a stress-driven cantilever beam, mimicking the biological superficial neuromasts found in the lateral line organ of fishes. Aiming to improve state-of-the-art flow sensing capability in autonomously flying and swimming robots, our artificial lateral line system was designed and developed to feature multi-parameter freestream flow measurements which provide information about (1) local flow velocities as measured by the signal amplitudes from the individual cantilevers as well as (2) propagation velocity, (3) linear forward/backward direction along the cantilever beam orientation and (4) periodicity of pulses or pulse trains determined by cross-correlating sensor signals. A real-time capable cross-correlation procedure was developed which makes it possible to extract freestream flow direction and velocity information from flow fluctuations. The computed flow velocities deviate from a commercial system by 0.09 m s(-1) at 0.5 m s(-1) and 0.15 m s(-1) at 1.0 m s(-1) flow velocity for a sampling rate of 240 Hz and a sensor distance of 38 mm. Although experiments were performed in air, the presented flow sensing system can be applied to underwater vehicles as well, once the sensors are embedded in a waterproof micro-electro-mechanical systems package.

Electro-codeposition of Ni-SiO2 nanocomposite coatings from deep eutectic solvent with improved corrosion resistance

NASA Astrophysics Data System (ADS)

Li, Ruiqian; Hou, Yuanyuan; Liang, Jun

2016-03-01

Electro-codeposition of nano-sized SiO2 particles into the metal matrix in aqueous solution is generally difficult. In this paper, the nano-sized SiO2 particles were successfully codeposited in the Ni matrix from a choline chloride (ChCl)/ethylene glycol (EG) based deep eutectic solvent (DES) by pulse electro-codeposition. The effects of nano-sized SiO2 particles on electrochemical behaviour of Ni(II) were investigated. The microstructure, composition and corrosion resistance of pure Ni and Ni-SiO2 nanocomposite coatings were explored. Results showed that the SiO2 nanoparticles exhibited excellent dispersion stability in ChCl:2EG DES without any stabilizing additives and the presence of SiO2 nanoparticles have significant effects on the nucleation mechanism of Ni. The maximum content of SiO2 nanoparticles in composite coatings can achieve 4.69 wt.%, which closes to the level of co-deposition micro-sized SiO2 particles from aqueous solution. The Ni-SiO2 nanocomposite coatings exhibit much better corrosion resistance than pure Ni coating, and the corrosion resistance performance increases with increasing SiO2 content in the composite coatings.

Widely tunable telecom MEMS-VCSEL for terahertz photomixing.

PubMed

Haidar, Mohammad Tanvir; Preu, Sascha; Paul, Sujoy; Gierl, Christian; Cesar, Julijan; Emsia, Ali; Küppers, Franko

2015-10-01

We report frequency-tunable terahertz (THz) generation with a photomixer driven by an ultra-broadband tunable micro-electro-mechanical system vertical-cavity surface-emitting laser (MEMS-VCSEL) and a fixed-wavelength VCSEL, as well as a tunable MEMS-VCSEL mixed with a distributed feedback (DFB) diode. A total frequency span of 3.4 THz is covered in direct detection mode and 3.23 THz in the homodyne mode. The tuning range is solely limited by the dynamic range of the photomixers and the Schottky diode/photoconductor used in the experiment.

Damage assessment in multilayered MEMS structures under thermal fatigue

NASA Astrophysics Data System (ADS)

Maligno, A. R.; Whalley, D. C.; Silberschmidt, V. V.

2011-07-01

This paper reports on the application of a Physics of Failure (PoF) methodology to assessing the reliability of a micro electro mechanical system (MEMS). Numerical simulations, based on the finite element method (FEM) using a sub-domain approach was used to examine the damage onset due to temperature variations (e.g. yielding of metals which may lead to thermal fatigue). In this work remeshing techniques were employed in order to develop a damage tolerance approach based on the assumption that initial flaws exist in the multi-layered.

System for generating two-dimensional masks from a three-dimensional model using topological analysis

DOEpatents

Schiek, Richard [Albuquerque, NM

2006-06-20

A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.

Long-Wavelength Beam Steerer Based on a Micro-Electromechanical Mirror

PubMed Central

Kos, Anthony B; Gerecht, Eyal

2013-01-01

Commercially available mirrors for scanning long-wavelength beams are too large for high-speed imaging. There is a need for a smaller, more agile pointing apparatus to provide images in seconds, not minutes or hours. A fast long-wavelength beam steerer uses a commercial micro-electro-mechanical system (MEMS) mirror controlled by a high-performance digital signal processor (DSP). The DSP allows high-speed raster scanning of the incident radiation, which is focused to a small waist onto the 9mm2, gold-coated, MEMS mirror surface, while simultaneously acquiring an undistorted, high spatial-resolution image of an object. The beam steerer hardware, software and performance are described. The system can also serve as a miniaturized, high-performance long-wavelength beam chopper for lock-in detection. PMID:26401426

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon. Degree awarded by Colorado Univ., Boulder, CO

NASA Technical Reports Server (NTRS)

Patterson, James D.

1997-01-01

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Comparative study on different types of segmented micro deformable mirrors

NASA Astrophysics Data System (ADS)

Qiao, Dayong; Yuan, Weizheng; Li, Kaicheng; Li, Xiaoying; Rao, Fubo

2006-02-01

In an adaptive-optical (AO) system, the wavefront of optical beam can be corrected with deformable mirror (DM). Based on MicroElectroMechanical System (MEMS) technology, segmented micro deformable mirrors can be built with denser actuator spacing than continuous face-sheet designs and have been widely researched. But the influence of the segment structure has not been thoroughly discussed until now. In this paper, the design, performance and fabrication of several micromachined, segmented deformable mirror for AO were investigated. The wavefront distorted by atmospheric turbulence was simulated in the frame of Kolmogorov turbulence model. Position function was used to describe the surfaces of the micro deformable mirrors in working state. The performances of deformable mirrors featuring square, brick, hexagonal and ring segment structures were evaluated in criteria of phase fitting error, the Strehl ratio after wavefront correction and the design considerations. Then the micro fabrication process and mask layout were designed and the fabrication of micro deformable mirrors was implemented. The results show that the micro deformable mirror with ring segments performs the best, but it is very difficult in terms of layout design. The micro deformable mirrors with square and brick segments are easy to design, but their performances are not good. The micro deformable mirror with hexagonal segments has not only good performance in terms of phase fitting error, the Strehl ratio and actuation voltage, but also no overwhelming difficulty in layout design.

Large deformation of uniaxially loaded slender microbeams on the basis of modified couple stress theory: Analytical solution and Galerkin-based method

NASA Astrophysics Data System (ADS)

Kiani, Keivan

2017-09-01

Large deformation regime of micro-scale slender beam-like structures subjected to axially pointed loads is of high interest to nanotechnologists and applied mechanics community. Herein, size-dependent nonlinear governing equations are derived by employing modified couple stress theory. Under various boundary conditions, analytical relations between axially applied loads and deformations are presented. Additionally, a novel Galerkin-based assumed mode method (AMM) is established to solve the highly nonlinear equations. In some particular cases, the predicted results by the analytical approach are also checked with those of AMM and a reasonably good agreement is reported. Subsequently, the key role of the material length scale on the load-deformation of microbeams is discussed and the deficiencies of the classical elasticity theory in predicting such a crucial mechanical behavior are explained in some detail. The influences of slenderness ratio and thickness of the microbeam on the obtained results are also examined. The present work could be considered as a pivotal step in better realizing the postbuckling behavior of nano-/micro- electro-mechanical systems consist of microbeams.

MEMS reliability: The challenge and the promise

DOE Office of Scientific and Technical Information (OSTI.GOV)

Miller, W.M.; Tanner, D.M.; Miller, S.L.

1998-05-01

MicroElectroMechanical Systems (MEMS) that think, sense, act and communicate will open up a broad new array of cost effective solutions only if they prove to be sufficiently reliable. A valid reliability assessment of MEMS has three prerequisites: (1) statistical significance; (2) a technique for accelerating fundamental failure mechanisms, and (3) valid physical models to allow prediction of failures during actual use. These already exist for the microelectronics portion of such integrated systems. The challenge lies in the less well understood micromachine portions and its synergistic effects with microelectronics. This paper presents a methodology addressing these prerequisites and a description ofmore » the underlying physics of reliability for micromachines.« less

Low Cost Digital Vibration Meter.

PubMed

Payne, W Vance; Geist, Jon

2007-01-01

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device.

Low Cost Digital Vibration Meter

PubMed Central

Payne, W. Vance; Geist, Jon

2007-01-01

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibration of the device in the plane perpendicular to the cantilever beam causes it to bend, which produces a measurable change in the resistance of a piezoresistor. These changes in resistance along with a unique signal-processing scheme are used to determine an approximation to the RMS acceleration sensed by the device. PMID:27110459

Embedded Spherical Localization for Micro Underwater Vehicles Based on Attenuation of Electro-Magnetic Carrier Signals

PubMed Central

Duecker, Daniel-André; Geist, A. René; Hengeler, Michael; Kreuzer, Edwin; Pick, Marc-André; Rausch, Viktor; Solowjow, Eugen

2017-01-01

Self-localization is one of the most challenging problems for deploying micro autonomous underwater vehicles (μAUV) in confined underwater environments. This paper extends a recently-developed self-localization method that is based on the attenuation of electro-magnetic waves, to the μAUV domain. We demonstrate a compact, low-cost architecture that is able to perform all signal processing steps present in the original method. The system is passive with one-way signal transmission and scales to possibly large μAUV fleets. It is based on the spherical localization concept. We present results from static and dynamic position estimation experiments and discuss the tradeoffs of the system. PMID:28445419

Embedded Spherical Localization for Micro Underwater Vehicles Based on Attenuation of Electro-Magnetic Carrier Signals.

PubMed

Duecker, Daniel-André; Geist, A René; Hengeler, Michael; Kreuzer, Edwin; Pick, Marc-André; Rausch, Viktor; Solowjow, Eugen

2017-04-26

Self-localization is one of the most challenging problems for deploying micro autonomous underwater vehicles ( μ AUV) in confined underwater environments. This paper extends a recently-developed self-localization method that is based on the attenuation of electro-magnetic waves, to the μ AUV domain. We demonstrate a compact, low-cost architecture that is able to perform all signal processing steps present in the original method. The system is passive with one-way signal transmission and scales to possibly large μ AUV fleets. It is based on the spherical localization concept. We present results from static and dynamic position estimation experiments and discuss the tradeoffs of the system.

Toward milli-Newton electro- and magneto-static microactuators

NASA Technical Reports Server (NTRS)

Fan, Long-Sheng

1993-01-01

Microtechnologies can potentially push integrated electro- and magnetostatic actuators toward the regime where constant forces in the order of milli-Newton (or torques in the order of micro-Newton meter) can be generated with constant inputs within a volume of 1.0 x 1.0 x 0.02 mm with 'conventional' technology. 'Micro' actuators are, by definition, actuators with dimensions confined within a millimeter cube. Integrated microactuators based on electrostatics typically have force/torque in the order of sub-micro-Newton (sub-nano-Newton meter). These devices are capable of moving small objects at MHz frequencies. On the other hand, suppose we want to move a one cubic millimeter object around with 100 G acceleration; a few milli-Newton force will be required. Thus, milli-Newton microactuators are very desirable for some immediate applications, and it challenges micromechanical researchers to develop new process technologies, designs, and materials toward this goal.

Micro glow plasma for localized nanostructural modification of carbon nanotube forest

NASA Astrophysics Data System (ADS)

Sarwar, Mirza Saquib us; Xiao, Zhiming; Saleh, Tanveer; Nojeh, Alireza; Takahata, Kenichi

2016-08-01

This paper reports the localized selective treatment of vertically aligned carbon nanotubes, or CNT forests, for radial size modification of the nanotubes through a micro-scale glow plasma established on the material. An atmospheric-pressure DC glow plasma is shown to be stably sustained on the surface of the CNT forest in argon using micromachined tungsten electrodes with diameters down to 100 μm. Experiments reveal thinning or thickening of the nanotubes under the micro glow depending on the process conditions including discharge current and process time. These thinning and thickening effects in the treated nanotubes are measured to be up to ˜30% and ˜300% in their diameter, respectively, under the tested conditions. The elemental and Raman analyses suggest that the treated region of the CNT forest is pure carbon and maintains a degree of crystallinity. The local plasma treatment process investigated may allow modification of material characteristics in different domains for targeted regions or patterns, potentially aiding custom design of micro-electro-mechanical systems and other emerging devices enabled by the CNT forest.

Micro glow plasma for localized nanostructural modification of carbon nanotube forest

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sarwar, Mirza Saquib us; Xiao, Zhiming; Saleh, Tanveer

2016-08-22

This paper reports the localized selective treatment of vertically aligned carbon nanotubes, or CNT forests, for radial size modification of the nanotubes through a micro-scale glow plasma established on the material. An atmospheric-pressure DC glow plasma is shown to be stably sustained on the surface of the CNT forest in argon using micromachined tungsten electrodes with diameters down to 100 μm. Experiments reveal thinning or thickening of the nanotubes under the micro glow depending on the process conditions including discharge current and process time. These thinning and thickening effects in the treated nanotubes are measured to be up to ∼30% andmore » ∼300% in their diameter, respectively, under the tested conditions. The elemental and Raman analyses suggest that the treated region of the CNT forest is pure carbon and maintains a degree of crystallinity. The local plasma treatment process investigated may allow modification of material characteristics in different domains for targeted regions or patterns, potentially aiding custom design of micro-electro-mechanical systems and other emerging devices enabled by the CNT forest.« less

Vibration analysis of a rotating functionally graded tapered microbeam based on the modified couple stress theory by DQEM

NASA Astrophysics Data System (ADS)

Ghadiri, Majid; Shafiei, Navvab; Alireza Mousavi, S.

2016-09-01

Due to having difficulty in solving governing nonlinear differential equations of a non-uniform microbeam, a few numbers of authors have studied such fields. In the present study, for the first time, the size-dependent vibration behavior of a rotating functionally graded (FG) tapered microbeam based on the modified couple stress theory is investigated using differential quadrature element method (DQEM). It is assumed that physical and mechanical properties of the FG microbeam are varying along the thickness that will be defined as a power law equation. The governing equations are determined using Hamilton's principle, and DQEM is presented to obtain the results for cantilever and propped cantilever boundary conditions. The accuracy and validity of the results are shown in several numerical examples. In order to display the influence of size on the first two natural frequencies and consequently changing of some important microbeam parameters such as material length scale, rate of cross section, angular velocity and gradient index of the FG material, several diagrams and tables are represented. The results of this article can be used in designing and optimizing elastic and rotary-type micro-electro-mechanical systems like micro-motors and micro-robots including rotating parts.

Universal Infantry Weapons Trainer (UIWT). Volume 1. M-16 Rifle Model.

DTIC Science & Technology

1980-07-01

id entityb bloc moo") The Universal Infantry Weapons Trainer (UIWT) is an electro-optic based , micro- computer controlled, training device that...CLASIIClATSON OF THIS PAOt(la., Diat Eaeied) t SUMMARY The Universal Infantry Weapon Trainer (UIWT), is an electro-optic based , microcomputer controlled...Routine Flowchart .... ................ .. 52 111-36 Fixed Base FIFO Operation ...... ................. 54 111-37 Moving Base FIFO Operation

Static and dynamic micro deformable mirror characterization by phase-shifting and time-averaged interferometry

NASA Astrophysics Data System (ADS)

Liotard, Arnaud; Zamkotsian, Frédéric

2017-11-01

The micro-opto-electro-mechanical systems (MOEMS), based on mature technologies of micro-electronics, are essential in the design of future astronomical instruments. One of these key-components is the microdeformable mirror for wave-front correction. Very challenging topics like search of exo-planets could greatly benefit from this technology. Design, realization and characterization of micro-Deformable Mirrors are under way at Laboratoire d'Astrophysique de Marseille (LAM) in collaboration with Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS). In order to measure the surface shape and the deformation parameters during operation of these devices, a high-resolution Twyman-Green interferometer has been developed. Measurements have been done on a tiltable micro-mirror (170*100μm2) designed by LAM-LAAS and realized by an American foundry, and also on an OKO deformable mirror (15mm diameter). Static characterization is made by phase shifting interferometry and dynamic measurements have been made by quantitative time-averaged interferometry. The OKO mirror has an actuator stroke of 370+/-10nm for 150V applied and its resonant frequency is 1170+/-50 Hz, and the tiltable mirror has a rotation cut-off frequency of 31+/-3 kHz.

Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems (MEMS)

NASA Astrophysics Data System (ADS)

Przekwas, Andrzej J.

1999-03-01

Computational design of MEMS involves several strongly coupled physical disciplines, including fluid mechanics, heat transfer, stress/deformation dynamics, electronics, electro/magneto statics, calorics, biochemistry and others. CFDRC is developing a new generation multi-disciplinary CAD systems for MEMS using high-fidelity field solvers on unstructured, solution-adaptive grids for a full range of disciplines. The software system, ACE + MEMS, includes all essential CAD tools; geometry/grid generation for multi- discipline, multi-equation solvers, GUI, tightly coupled configurable 3D field solvers for FVM, FEM and BEM and a 3D visualization/animation tool. The flow/heat transfer/calorics/chemistry equations are solved with unstructured adaptive FVM solver, stress/deformation are computed with a FEM STRESS solver and a FAST BEM solver is used to solve linear heat transfer, electro/magnetostatics and elastostatics equations on adaptive polygonal surface grids. Tight multidisciplinary coupling and automatic interoperability between the tools was achieved by designing a comprehensive database structure and APIs for complete model definition. The virtual model definition is implemented in data transfer facility, a publicly available tool described in this paper. The paper presents overall description of the software architecture and MEMS design flow in ACE + MEMS. It describes current status, ongoing effort and future plans for the software. The paper also discusses new concepts of mixed-level and mixed- dimensionality capability in which 1D microfluidic networks are simulated concurrently with 3D high-fidelity models of discrete components.

Sub-Optical Lithography With Nanometer Definition Masks

NASA Technical Reports Server (NTRS)

Hartley, Frank T.; Malek, Chantal Khan; Neogi, Jayant

2000-01-01

Nanometer feature size lithography represents a major paradigm shift for the electronics and micro-electro-mechanical industries. In this paper, we discuss the capacity of dynamic focused reactive ion beam (FIB) etching systems to undertake direct and highly anisotropic erosion of thick evaporated gold coatings on boron-doped silicon X-ray mask membranes. FIB offers a new level of flexibility in micro fabrication, allowing for fast fabrication of X-ray masks, where pattern definition and surface alteration are combined in the same step which eliminates the whole lithographic process, in particular resist, resist development, electro-deposition and resist removal. Focused ion beam diameters as small as 7 nm can be obtained enabling fabrication well into the sub-20 nm regime. In preliminary demonstrations of this X-ray mask fabrication technique 22 nm width lines were milled directly through 0.9 microns of gold and a miniature mass spectrometer pattern was milled through over 0.5 microns of gold. Also presented are the results of the shadow printing, using the large depth of field of synchrotron high energy parallel X-ray beam, of these and other sub-optical defined patterns in photoresist conformally coated over surfaces of extreme topographical variation. Assuming that electronic circuits and/or micro devices scale proportionally, the surface area of devices processed with X-ray lithography and 20 nm critical dimension X-ray masks would be 0.5% that of contemporary devices (350 nm CD). The 20 CD mask fabrication represents an initial effort - a further factor of three reduction is anticipated which represents a further order-of-magnitude reduction in die area.

High Performance Microbial Fuel Cells and Supercapacitors Using Micro-Electro-Mechanical System (MEMS) Technology

NASA Astrophysics Data System (ADS)

Ren, Hao

A Microbial fuel cell (MFC) is a bio-inspired carbon-neutral, renewable electrochemical converter to extract electricity from catabolic reaction of micro-organisms. It is a promising technology capable of directly converting the abundant biomass on the planet into electricity and potentially alleviate the emerging global warming and energy crisis. The current and power density of MFCs are low compared with conventional energy conversion techniques. Since its debut in 2002, many studies have been performed by adopting a variety of new configurations and structures to improve the power density. The reported maximum areal and volumetric power densities range from 19 mW/m2 to 1.57 W/m2 and from 6.3 W/m3 to 392 W/m 3, respectively, which are still low compared with conventional energy conversion techniques. In this dissertation, the impact of scaling effect on the performance of MFCs are investigated, and it is found that by scaling down the characteristic length of MFCs, the surface area to volume ratio increases and the current and power density improves. As a result, a miniaturized MFC fabricated by Micro-Electro-Mechanical System (MEMS) technology with gold anode is presented in this dissertation, which demonstrate a high power density of 3300 W/m3. The performance of the MEMS MFC is further improved by adopting anodes with higher surface area to volume ratio, such as carbon nanotube (CNT) and graphene based anodes, and the maximum power density is further improved to a record high power density of 11220 W/m3. A novel supercapacitor by regulating the respiration of the bacteria is also presented, and a high power density of 531.2 A/m2 (1,060,000 A/m3) and 197.5 W/m2 (395,000 W/m3), respectively, are marked, which are one to two orders of magnitude higher than any previously reported microbial electrochemical techniques.

PZT Thin Film Piezoelectric Traveling Wave Motor

NASA Technical Reports Server (NTRS)

Shen, Dexin; Zhang, Baoan; Yang, Genqing; Jiao, Jiwei; Lu, Jianguo; Wang, Weiyuan

1995-01-01

With the development of micro-electro-mechanical systems (MEMS), its various applications are attracting more and more attention. Among MEMS, micro motors, electrostatic and electromagnetic, are the typical and important ones. As an alternative approach, the piezoelectric traveling wave micro motor, based on thin film material and integrated circuit technologies, circumvents many of the drawbacks of the above mentioned two types of motors and displays distinct advantages. In this paper we report on a lead-zirconate-titanate (PZT) piezoelectric thin film traveling wave motor. The PZT film with a thickness of 150 micrometers and a diameter of 8 mm was first deposited onto a metal substrate as the stator material. Then, eight sections were patterned to form the stator electrodes. The rotor had an 8 kHz frequency power supply. The rotation speed of the motor is 100 rpm. The relationship of the friction between the stator and the rotor and the structure of the rotor on rotation were also studied.

A high bandwidth three-axis out-of-plane motion measurement system based on optical beam deflection

NASA Astrophysics Data System (ADS)

Piyush, P.; Giridhar, M. S.; Jayanth, G. R.

2018-03-01

Multi-axis measurement of motion is indispensable for characterization of dynamic systems and control of motion stages. This paper presents an optical beam deflection-based measurement system to simultaneously measure three-axis out-of-plane motion of both micro- and macro-scale targets. Novel strategies are proposed to calibrate the sensitivities of the measurement system. Subsequently the measurement system is experimentally realized and calibrated. The system is employed to characterize coupled linear and angular motion of a piezo-actuated stage. The measured motion is shown to be in agreement with theoretical expectation. Next, the high bandwidth of the measurement system has been showcased by utilizing it to measure coupled two-axis transient motion of a Radio Frequency Micro-Electro-Mechanical System switch with a rise time of about 60 μs. Finally, the ability of the system to measure out-of-plane angular motion about the second axis has been demonstrated by measuring the deformation of a micro-cantilever beam.

Human Pulse Wave Measurement by MEMS Electret Condenser Microphone

NASA Astrophysics Data System (ADS)

Nomura, Shusaku; Hanasaka, Yasushi; Ishiguro, Tadashi; Ogawa, Hiroshi

A micro Electret Condenser Microphone (ECM) fabricated by Micro Electro Mechanical System (MEMS) technology was employed as a novel apparatus for human pulse wave measurement. Since ECM frequency response characteristic, i.e. sensitivity, logically maintains a constant level at lower than the resonance frequency (stiffness control), the slightest pressure difference at around 1.0Hz generated by human pulse wave is expected to detect by MEMS-ECM. As a result of the verification of frequency response of MEMS-ECM, it was found that -20dB/dec of reduction in the sensitivity around 1.0Hz was engendered by a high input-impedance amplifier, i.e. the field effect transistor (FET), mounted near MEMS chip for amplifying tiny ECM signal. Therefore, MEMS-ECM is assumed to be equivalent with a differentiation circuit at around human pulse frequency. Introducing compensation circuit, human pulse wave was successfully obtained. In addition, the radial and ulnar artery tracing, and pulse wave velocity measurement at forearm were demonstrated; as illustrating a possible application of this micro device.

In situ measurement of the junction temperature of light emitting diodes using a flexible micro temperature sensor.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Fan, Wei-Yuan; Hsieh, Wei-Jung

2009-01-01

This investigation aimed to fabricate a flexible micro resistive temperature sensor to measure the junction temperature of a light emitting diode (LED). The junction temperature is typically measured using a thermal resistance measurement approach. This approach is limited in that no standard regulates the timing of data capture. This work presents a micro temperature sensor that can measure temperature stably and continuously, and has the advantages of being lightweight and able to monitor junction temperatures in real time. Micro-electro-mechanical-systems (MEMS) technologies are employed to minimize the size of a temperature sensor that is constructed on a stainless steel foil substrate (SS-304 with 30 μm thickness). A flexible micro resistive temperature sensor can be fixed between the LED chip and the frame. The junction temperature of the LED can be measured from the linear relationship between the temperature and the resistance. The sensitivity of the micro temperature sensor is 0.059 ± 0.004 Ω/°C. The temperature of the commercial CREE(®) EZ1000 chip is 119.97 °C when it is thermally stable, as measured using the micro temperature sensor; however, it was 126.9 °C, when measured by thermal resistance measurement. The micro temperature sensor can be used to replace thermal resistance measurement and performs reliably.

Hydrogen oxidation mechanisms on Ni/yttria stabilized zirconia anodes: Separation of reaction pathways by geometry variation of pattern electrodes

NASA Astrophysics Data System (ADS)

Doppler, M. C.; Fleig, J.; Bram, M.; Opitz, A. K.

2018-03-01

Nickel/yttria stabilized zirconia (YSZ) electrodes are affecting the overall performance of solid oxide fuel cells (SOFCs) in general and strongly contribute to the cell resistance in case of novel metal supported SOFCs in particular. The electrochemical fuel conversion mechanisms in these electrodes are, however, still only partly understood. In this study, micro-structured Ni thin film electrodes on YSZ with 15 different geometries are utilized to investigate reaction pathways for the hydrogen electro-oxidation at Ni/YSZ anodes. From electrodes with constant area but varying triple phase boundary (TPB) length a contribution to the electro-catalytic activity is found that does not depend on the TPB length. This additional activity could clearly be attributed to a yet unknown reaction pathway scaling with the electrode area. It is shown that this area related pathway has significantly different electrochemical behavior compared to the TPB pathway regarding its thermal activation, sulfur poisoning behavior, and H2/H2O partial pressure dependence. Moreover, possible reaction mechanisms of this reaction pathway are discussed, identifying either a pathway based on hydrogen diffusion through Ni with water release at the TPB or a path with oxygen diffusion through Ni to be a very likely explanation for the experimental results.

Contributed Review: Experimental characterization of inverse piezoelectric strain in GaN HEMTs via micro-Raman spectroscopy

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bagnall, Kevin R.; Wang, Evelyn N.

2016-06-15

Micro-Raman thermography is one of the most popular techniques for measuring local temperature rise in gallium nitride (GaN) high electron mobility transistors with high spatial and temporal resolution. However, accurate temperature measurements based on changes in the Stokes peak positions of the GaN epitaxial layers require properly accounting for the stress and/or strain induced by the inverse piezoelectric effect. It is common practice to use the pinched OFF state as the unpowered reference for temperature measurements because the vertical electric field in the GaN buffer that induces inverse piezoelectric stress/strain is relatively independent of the gate bias. Although this approachmore » has yielded temperature measurements that agree with those derived from the Stokes/anti-Stokes ratio and thermal models, there has been significant difficulty in quantifying the mechanical state of the GaN buffer in the pinched OFF state from changes in the Raman spectra. In this paper, we review the experimental technique of micro-Raman thermography and derive expressions for the detailed dependence of the Raman peak positions on strain, stress, and electric field components in wurtzite GaN. We also use a combination of semiconductor device modeling and electro-mechanical modeling to predict the stress and strain induced by the inverse piezoelectric effect. Based on the insights gained from our electro-mechanical model and the best values of material properties in the literature, we analyze changes in the E{sub 2} high and A{sub 1} (LO) Raman peaks and demonstrate that there are major quantitative discrepancies between measured and modeled values of inverse piezoelectric stress and strain. We examine many of the hypotheses offered in the literature for these discrepancies but conclude that none of them satisfactorily resolves these discrepancies. Further research is needed to determine whether the electric field components could be affecting the phonon frequencies apart from the inverse piezoelectric effect in wurtzite GaN, which has been predicted theoretically in zinc blende gallium arsenide (GaAs).« less

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

PubMed Central

Abels, Claudio; Mastronardi, Vincenzo Mariano; Guido, Francesco; Dattoma, Tommaso; Qualtieri, Antonio; Megill, William M.; De Vittorio, Massimo; Rizzi, Francesco

2017-01-01

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described. PMID:28489040

Quantitative Accelerated Life Testing of MEMS Accelerometers.

PubMed

Bâzu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil; Loicq, Jerome; Habraken, Serge; Collette, Jean-Paul

2007-11-20

Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in the"worst case" being smaller than 10 -7 h -1 .

Novel Micro ElectroMechanical Systems (MEMS) Packaging for the Skin of the Satellite

NASA Technical Reports Server (NTRS)

Darrin, M. Ann; Osiander, Robert; Lehtonen, John; Farrar, Dawnielle; Douglas, Donya; Swanson, Ted

2004-01-01

This paper includes a discussion of the novel packaging techniques that are needed to place MEMS based thermal control devices on the skin of various satellites, eliminating the concern associated with potential particulates &om integration and test or the launch environment. Protection of this MEMS based thermal device is achieved using a novel polymer that is both IR transmissive and electrically conductive. This polymer was originally developed and qualified for space flight application by NASA at the Langley Research Center. The polymer material, commercially known as CPI, is coated with a thin layer of ITO and sandwiched between two window-like frames. The packaging of the MEMS based radiator assembly offers the benefits of micro-scale devices in a chip on board fashion, with the level of protection generally found in packaged parts.

Acrylamide: formation, occurrence in food products, detection methods, and legislation.

PubMed

Arvanitoyannis, Ioannis S; Dionisopoulou, Niki

2014-01-01

This review aims at summarizing the most recent updates in the field of acrylamide (AA) formation (mechanism, conditions) and the determination of AA in a number of foods (fried or baked potatoes, chips, coffee, bread, etc). The methods applied for AA detection [Capillary Electrophoresis-Mass Spectrometry (CE-MS), Liquid Chromatography-Mass Spectrometry (LC-MS), Non-Aqueous Capillary Electrophoresis (NACE), High Performance Liquid Chromatography-Mass Spectrometry (HPLC-MS), Pressurized Fluid Extraction (PFE), Matrix Solid-Phase Dispersion (MSPD), Gas Chromatography-Mass Spectrometry (GC-MS), Solid-Phase MicroExtraction-Gas Chromatography (SPME-GC), Enzyme Linked Immunosorbent Assay (ELISA), and MicroEmulsion ElectroKinetic Chromatography (MEEKC) are presented and commented. Several informative figures and tables are included to show the effect of conditions (temperature, time) on the AA formation. A section is also included related to AA legislation in EU and US.

Fabricating micro-instruments in surface-micromachined polycrystalline silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Comtois, J.H.; Michalicek, M.A.; Barron, C.C.

1997-04-01

Smaller, lighter instruments can be fabricated as Micro-Electro-Mechanical Systems (MEMS), having micron scale moving parts packaged together with associated control and measurement electronics. Batch fabrication of these devices will make economical applications such as condition-based machine maintenance and remote sensing. The choice of instrumentation is limited only by the designer`s imagination. This paper presents one genre of MEMS fabrication, surface-micromachined polycrystalline silicon (polysilicon). Two currently available but slightly different polysilicon processes are presented. One is the ARPA-sponsored ``Multi-User MEMS ProcesS`` (MUMPS), available commercially through MCNC; the other is the Sandia National Laboratories ``Sandia Ultra-planar Multilevel MEMS Technology`` (SUMMiT). Example componentsmore » created in both processes will be presented, with an emphasis on actuators, actuator force testing instruments, and incorporating actuators into larger instruments.« less

Simulation of Couette flow using conventional Burnett equations with modified slip boundary conditions

NASA Astrophysics Data System (ADS)

Liu, Hualin; Zhao, Wenwen; Chen, Weifang

2016-11-01

Gas or liquid flow through small channels has become more and more popular due to the micro-electro-mechanical systems (MEMS) fabrication technologies such as micro-motors, electrostatic comb-drive, micro-chromatographs, micro-actuators, micro-turbines and micro-pumps, etc. The flow conditions in and around these systems are always recognized as typical transitional regimes. Under these conditions, the mean free path of gas molecules approaches the characteristic scale of the micro-devices itself, and due to the little collisions the heat and momentum cannot equilibrate between the wall and fluids quickly. Couette flow is a simple and critical model in fluid dynamics which focuses on the mechanism of the heat transfer in shear-driven micro-cavities or micro-channels. Despite numerous work on the numerical solutions of the Couette flow, how to propose stable and accurate slip boundary conditions in rarefied flow conditions still remains to be elucidated. In this paper, converged solutions for steady-state micro Couette flows are obtained by using conventional Burnett equations with a set of modified slip boundary conditions. Instead of using the physical variables at the wall, the modified slip conditions use the variables at the edge of the Knudsen layer based on a physically plausible assumption in literature that Knudsen layer has a thickness only in the order of a mean free path and molecules are likely to travel without collision in this layer. Numerical results for non-dimensional wall shear stress and heat flux are compared with those of the DSMC solutions. Although there are not much improvement in the accuracy by using this modified slip conditions, the modified conditions perform much better than the unmodified slip conditions for numerical stabilization. All results show that the set of conventional Burnett equations with second order modified conditions are proved to be an appropriate model for the micro-Couette flows.

Mimosa pudica: Electrical and mechanical stimulation of plant movements.

PubMed

Volkov, Alexander G; Foster, Justin C; Ashby, Talitha A; Walker, Ronald K; Johnson, Jon A; Markin, Vladislav S

2010-02-01

Thigmonastic movements in the sensitive plant Mimosa pudica L., associated with fast responses to environmental stimuli, appear to be regulated through electrical and chemical signal transductions. The thigmonastic responses of M. pudica can be considered in three stages: stimulus perception, electrical signal transmission and induction of mechanical, hydrodynamical and biochemical responses. We investigated the mechanical movements of the pinnae and petioles in M. pudica induced by the electrical stimulation of a pulvinus, petiole, secondary pulvinus or pinna by a low electrical voltage and charge. The threshold value was 1.3-1.5 V of applied voltage and 2 to 10 microC of charge for the closing of the pinnules. Both voltage and electrical charge are responsible for the electro-stimulated closing of a leaf. The mechanism behind closing the leaf in M. pudica is discussed. The hydroelastic curvature mechanism closely describes the kinetics of M. pudica leaf movements.

Investigation of baseline measurement resolution of a Si plate-based extrinsic Fabry-Perot interferometer

NASA Astrophysics Data System (ADS)

Ushakov, Nikolai; Liokumovich, Leonid

2014-05-01

Measurement of a wafer thickness is of a great value for fabrication and interrogation of MEMS/MOEMS devices, as well as conventional optical fiber sensors. In the current paper we investigate the abilities of the wavelength-scanning interferometry techniques for registering the baseline of an extrinsic fiber Fabry-Perot interferometer (EFPI) with the cavity formed by the two sides of a silicon plate. In order to enhance the resolution, an improved signal processing algorithm was developed. Various experiments, including contact and non-contact measurement of a silicon wafer thickness were performed, with the achieved resolutions from 10 to 20 pm. This enables one to use the described approach for high-precision measurement of geometric parameters of micro electro (electro-optic) mechanical systems for their characterization, utilization in sensing tasks and fabrication control. An ability of a Si plate-based EFPI interrogated by the developed technique to capture temperature variations of about 4 mK was demonstrated.

Non-linear vibrational response of Ge and SiC membranes

NASA Astrophysics Data System (ADS)

Zhou, L. Q.; Colston, G.; Pearce, M. J.; Prince, R. G.; Myronov, M.; Leadley, D. R.; Trushkevych, O.; Edwards, R. S.

2017-07-01

Characterisation of membranes produced for use as micro-electro-mechanical systems using vibrational techniques can give a measure of their behaviour and suitability for operation in different environments. Two membranes are studied here: germanium (Ge) and cubic silicon carbide (3C-SiC) on a silicon (Si) substrate. When driven at higher displacements, the membranes exhibit self-protecting behaviour. The resonant vibration amplitude is limited to a maximum value of around 10 nm, through dissipation of energy via higher harmonic vibrations. This is observed for both materials, despite their different Young's moduli and defect densities.

SmallSat Precision Navigation with Low-Cost MEMS IMU Swarms

NASA Technical Reports Server (NTRS)

Christian, John; Bishop, Robert; Martinez, Andres; Petro, Andrew

2015-01-01

The continued advancement of small satellite-based science missions requires the solution to a number of important technical challenges. Of particular note is that small satellite missions are characterized by tight constraints on cost, mass, power, and volume that make them unable to fly the high-quality Inertial Measurement Units (IMUs) required for orbital missions demanding precise orientation and positioning. Instead, small satellite missions typically fly low-cost Micro-Electro-Mechanical System (MEMS) IMUs. Unfortunately, the performance characteristics of these MEMS IMUs make them ineffectual in many spaceflight applications when employed in a single IMU system configuration.

Micromechanical Switches on GaAs for Microwave Applications

NASA Technical Reports Server (NTRS)

Randall, John N.; Goldsmith, Chuck; Denniston, David; Lin, Tsen-Hwang

1995-01-01

In this presentation, we describe the fabrication of micro-electro-mechanical system (MEMS) devices, in particular, of low-frequency multi-element electrical switches using SiO2 cantilevers. The switches discussed are related to micromechanical membrane structures used to perform switching of optical signals on silicon substrates. These switches use a thin metal membrane which is actuated by an electrostatic potential, causing the switch to make or break contact. The advantages include: superior isolation, high power handling capabilities, high radiation hardening, very low power operations, and the ability to integrate onto GaAs monolithic microwave integrated circuit (MMIC) chips.

Applications of MEMS for Space Exploration

NASA Astrophysics Data System (ADS)

Tang, William C.

1998-03-01

Space exploration in the coming century will emphasize cost effectiveness and highly focused mission objectives, which will result in frequent multiple missions that broaden the scope of space science and to validate new technologies on a timely basis. Micro Electro Mechanical Systems (MEMS) is one of the key enabling technologies to create cost-effective, ultra-miniaturized, robust, and functionally focused spacecraft for both robotic and human exploration programs. Examples of MEMS devices at various stages of development include microgyroscope, microseismometer, microhygrometer, quadrupole mass spectrometer, and micropropulsion engine. These devices, when proven successful, will serve as models for developing components and systems for new-millennium spacecraft.

Sensing textile seam-line for wearable multimodal physiological monitoring.

PubMed

McKnight, M; Agcayazi, T; Kausche, H; Ghosh, T; Bozkurt, A

2016-08-01

This paper investigates a novel multimodal sensing method by forming seam-lines of conductive textile fibers into commercially available fabrics. The proposed ultra-low cost micro-electro-mechanical sensor would provide, wearable, flexible, textile based biopotential signal recording, wetness detection and tactile sensing simultaneously. Three types of fibers are evaluated for their array-based sensing capability, including a 3D printed conductive fiber, a multiwall carbon nanotube based fiber, and a commercially available stainless steel conductive thread. The sensors were shown to have a correlation between capacitance and pressure; impedance and wetness; and recorded potential and ECG waveforms.

On nonlinear thermo-electro-elasticity.

PubMed

Mehnert, Markus; Hossain, Mokarram; Steinmann, Paul

2016-06-01

Electro-active polymers (EAPs) for large actuations are nowadays well-known and promising candidates for producing sensors, actuators and generators. In general, polymeric materials are sensitive to differential temperature histories. During experimental characterizations of EAPs under electro-mechanically coupled loads, it is difficult to maintain constant temperature not only because of an external differential temperature history but also because of the changes in internal temperature caused by the application of high electric loads. In this contribution, a thermo-electro-mechanically coupled constitutive framework is proposed based on the total energy approach. Departing from relevant laws of thermodynamics, thermodynamically consistent constitutive equations are formulated. To demonstrate the performance of the proposed thermo-electro-mechanically coupled framework, a frequently used non-homogeneous boundary-value problem, i.e. the extension and inflation of a cylindrical tube, is solved analytically. The results illustrate the influence of various thermo-electro-mechanical couplings.

On nonlinear thermo-electro-elasticity

PubMed Central

Mehnert, Markus; Hossain, Mokarram

2016-01-01

Electro-active polymers (EAPs) for large actuations are nowadays well-known and promising candidates for producing sensors, actuators and generators. In general, polymeric materials are sensitive to differential temperature histories. During experimental characterizations of EAPs under electro-mechanically coupled loads, it is difficult to maintain constant temperature not only because of an external differential temperature history but also because of the changes in internal temperature caused by the application of high electric loads. In this contribution, a thermo-electro-mechanically coupled constitutive framework is proposed based on the total energy approach. Departing from relevant laws of thermodynamics, thermodynamically consistent constitutive equations are formulated. To demonstrate the performance of the proposed thermo-electro-mechanically coupled framework, a frequently used non-homogeneous boundary-value problem, i.e. the extension and inflation of a cylindrical tube, is solved analytically. The results illustrate the influence of various thermo-electro-mechanical couplings. PMID:27436985

Size-dependent piezoelectric energy-harvesting analysis of micro/nano bridges subjected to random ambient excitations

NASA Astrophysics Data System (ADS)

Radgolchin, Moeen; Moeenfard, Hamid

2018-02-01

The construction of self-powered micro-electro-mechanical units by converting the mechanical energy of the systems into electrical power has attracted much attention in recent years. While power harvesting from deterministic external excitations is state of the art, it has been much more difficult to derive mathematical models for scavenging electrical energy from ambient random vibrations, due to the stochastic nature of the excitations. The current research concerns analytical modeling of micro-bridge energy harvesters based on random vibration theory. Since classical elasticity fails to accurately predict the mechanical behavior of micro-structures, strain gradient theory is employed as a powerful tool to increase the accuracy of the random vibration modeling of the micro-harvester. Equations of motion of the system in the time domain are derived using the Lagrange approach. These are then utilized to determine the frequency and impulse responses of the structure. Assuming the energy harvester to be subjected to a combination of broadband and limited-band random support motion and transverse loading, closed-form expressions for mean, mean square, correlation and spectral density of the output power are derived. The suggested formulation is further exploited to investigate the effect of the different design parameters, including the geometric properties of the structure as well as the properties of the electrical circuit on the resulting power. Furthermore, the effect of length scale parameters on the harvested energy is investigated in detail. It is observed that the predictions of classical and even simple size-dependent theories (such as couple stress) appreciably differ from the findings of strain gradient theory on the basis of random vibration. This study presents a first-time modeling of micro-scale harvesters under stochastic excitations using a size-dependent approach and can be considered as a reliable foundation for future research in the field of micro/nano harvesters subjected to non-deterministic loads.

Wear-resistance investigation of electro-screen coatings obtained using electroerosive powders of micro and nanofractions

NASA Astrophysics Data System (ADS)

Ageev, E. V.; Altukhov, A. Yu; Malneva, Yu V.; Novikov, A. N.

2018-03-01

The results of the wear resistance investigation of electro sparking coatings, applied using electrode material from electroerosive powders of hard alloy VK-8 (90%) with the addition of powder of high-speed steel of grade R6M5 (10%), are presented. Electro spark coatings were formed on samples of 30KhGSA steel using these electrodes and installation UR-121. The coefficient of friction and the wear rate of the surface of the sample and counterbody were measured on an automated friction machine “Tribometer” (CSM Instruments, Switzerland), controlled by a computer, according to the standard “ball-disk” test scheme.

Design of liquid temperature sensor based on bending loss phenomenon of plastic optic fiber and electro-optic effect of Mach-Zehnder interferometer

NASA Astrophysics Data System (ADS)

Kumar, Santosh; Swaminathan, S.

2016-04-01

The efficient application of electro-optic effect in lithium niobate based Mach-Zehnder interferometer (MZI) to construct the temperature sensor is used. An experimental set up for liquid temperature sensor is proposed. Temperature dependence of the bending loss light energy in multimode micro-plastic optical fiber (m-POF) and electro-optic effect of MZI are used. The performance of sensor at different temperatures is measured. It is seen that the light output of MZI switches from one port to the other port as temperature of liquid changes from 0°C to 100°C.

Micro pulling down growth of very thin shape memory alloys single crystals

NASA Astrophysics Data System (ADS)

López-Ferreño, I.; Juan, J. San; Breczewski, T.; López, G. A.; Nó, M. L.

Shape memory alloys (SMAs) have attracted much attention in the last decades due to their thermo-mechanical properties such as superelasticity and shape memory effect. Among the different families of SMAs, Cu-Al-Ni alloys exhibit these properties in a wide range of temperatures including the temperature range of 100-200∘C, where there is a technological demand of these functional materials, and exhibit excellent behavior at small scale making them more competitive for applications in Micro Electro-Mechanical Systems (MEMS). However, polycrystalline alloys of Cu-based SMAs are very brittle so that they show their best thermo-mechanical properties in single-crystal state. Nowadays, conventional Bridgman and Czochralski methods are being applied to elaborate single-crystal rods up to a minimum diameter of 1mm, but no works have been reported for smaller diameters. With the aim of synthesizing very thin single-crystals, the Micro-Pulling Down (μ-PD) technique has been applied, for which the capillarity and surface tension between crucible and the melt play a critical role. The μ-PD method has been successfully applied to elaborate several cylindrical shape thin single-crystals down to 200μm in diameter. Finally, the martensitic transformation, which is responsible for the shape memory properties of these alloys, has been characterized for different single-crystals. The experimental results evidence the good quality of the grown single-crystals.

Piezoelectric devices for generating low power

NASA Astrophysics Data System (ADS)

Chilibon, Irinela

2016-12-01

This paper reviews concepts and applications in low-power electronics and energy harvesting technologies. Various piezoelectric materials and devices for small power generators useful in renewable electricity are presented. The vibrating piezoelectric device differs from the typical electrical power source in that it has capacitive rather than inductive source impedance, and may be driven by mechanical vibrations of varying amplitude. In general, vibration energy could be converted into electrical energy using one of three techniques: electrostatic charge, magnetic fields and piezoelectric. A low power piezoelectric generator, having a PZT element was realised in order to supply small electronic elements, such as optoelectronic small devices, LEDs, electronic watches, small sensors, interferometry with lasers or Micro-electro-mechanical System (MEMS) array with multi-cantilevers.

Mask-less deposition of Au-SnO2 nanocomposites on CMOS MEMS platform for ethanol detection.

PubMed

Santra, S; Sinha, A K; De Luca, A; Ali, S Z; Udrea, F; Guha, P K; Ray, S K; Gardner, J W

2016-03-29

Here we report on the mask-less deposition of Au-SnO2 nanocomposites with a silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) platform through the use of dip pen nanolithography (DPN) to create a low-cost ethanol sensor. MEMS technology is used in order to achieve low power consumption, by the employment of a membrane structure formed using deep reactive ion etching technique. The device consists of an embedded tungsten micro-heater with gold interdigitated electrodes on top of the SOI membrane. The tungsten micro-heater is used to raise the membrane temperature up to its operating temperature and the electrodes are used to measure the resistance of the nanocomposite sensing layer. The CMOS MEMS devices have high electro-thermal efficiency, with 8.2 °C temperature increase per mW power of consumption. The sensing material (Au-SnO2 nanocomposite) was synthesised starting from SnO nanoplates, then Au nanoparticles were attached chemically to the surface of SnO nanoplates, finally the mixture was heated at 700 °C in an oven in air for 4 h. This composite material was sonicated for 2 h in terpineol to make a viscous homogeneous slurry and then 'written' directly across the electrode area using the DPN technique without any mask. The devices were characterised by exposure to ethanol vapour in humid air in the concentration range of 100-1000 ppm. The sensitivity varied from 1.2 to 0.27 ppm(-1) for 100-1000 ppm of ethanol at 10% relative humid air. Selectivity measurements showed that the sensors were selective towards ethanol when they were exposed to acetone and toluene.

Mask-less deposition of Au-SnO2 nanocomposites on CMOS MEMS platform for ethanol detection

NASA Astrophysics Data System (ADS)

Santra, S.; Sinha, A. K.; De Luca, A.; Ali, S. Z.; Udrea, F.; Guha, P. K.; Ray, S. K.; Gardner, J. W.

2016-03-01

Here we report on the mask-less deposition of Au-SnO2 nanocomposites with a silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) platform through the use of dip pen nanolithography (DPN) to create a low-cost ethanol sensor. MEMS technology is used in order to achieve low power consumption, by the employment of a membrane structure formed using deep reactive ion etching technique. The device consists of an embedded tungsten micro-heater with gold interdigitated electrodes on top of the SOI membrane. The tungsten micro-heater is used to raise the membrane temperature up to its operating temperature and the electrodes are used to measure the resistance of the nanocomposite sensing layer. The CMOS MEMS devices have high electro-thermal efficiency, with 8.2 °C temperature increase per mW power of consumption. The sensing material (Au-SnO2 nanocomposite) was synthesised starting from SnO nanoplates, then Au nanoparticles were attached chemically to the surface of SnO nanoplates, finally the mixture was heated at 700 °C in an oven in air for 4 h. This composite material was sonicated for 2 h in terpineol to make a viscous homogeneous slurry and then ‘written’ directly across the electrode area using the DPN technique without any mask. The devices were characterised by exposure to ethanol vapour in humid air in the concentration range of 100-1000 ppm. The sensitivity varied from 1.2 to 0.27 ppm-1 for 100-1000 ppm of ethanol at 10% relative humid air. Selectivity measurements showed that the sensors were selective towards ethanol when they were exposed to acetone and toluene.

Mechanical behavior simulation of MEMS-based cantilever beam using COMSOL multiphysics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Acheli, A., E-mail: aacheli@cdta.dz; Serhane, R.

This paper presents the studies of mechanical behavior of MEMS cantilever beam made of poly-silicon material, using the coupling of three application modes (plane strain, electrostatics and the moving mesh) of COMSOL Multi-physics software. The cantilevers playing a key role in Micro Electro-Mechanical Systems (MEMS) devices (switches, resonators, etc) working under potential shock. This is why they require actuation under predetermined conditions, such as electrostatic force or inertial force. In this paper, we present mechanical behavior of a cantilever actuated by an electrostatic force. In addition to the simplification of calculations, the weight of the cantilever was not taken intomore » account. Different parameters like beam displacement, electrostatics force and stress over the beam have been calculated by finite element method after having defining the geometry, the material of the cantilever model (fixed at one of ends but is free to move otherwise) and his operational space.« less

Development of a new sensor based on micro-electro-mechanical systems for objective in vivo measurement of the cutaneous temperature: application to foundations.

PubMed

Korichi, Rodolphe; Mac-Mary, Sophie; Elkhyat, Ahmed; Sainthillier, Jean-Marie; Ränsch, Pascal; Humbert, Philippe; Viviant, Eric; Gazano, Germaine; Mahé, Christian

2006-08-01

The purpose of this work was to develop a new sensor for objective in vivo measurement of the cutaneous temperature based on micro-electro-mechanical systems (MEMS), and to compare these performances with those of a classical thermocouple. Research on this new sensor was carried out to allow the quantification of the thermal properties of the made-up skin. Sixteen female subjects divided into two different age groups (18-35 and >50 years old) were recruited for this study. Several zones of the face and forearms were made up at random with foundations containing or not a thermoregulator raw material. The quantity of foundation applied on the skin was standardized and measurements were carried out first before make-up, and then 10 s and 5 min after make-up. The new sensor and the thermocouple were used successively on each zone. The cutaneous temperature was expressed in degrees celsius. The two systems are similar in terms of repeatability and reproducibility, with some differences in sensibility. The data measured by the MEMS sensor appear lower than those measured by the thermocouple. After make-up, the MEMS sensor detects a progressive increase of the temperature in time whereas the thermocouple detects a decrease. We found the same evolution on the face but in a more attenuated way. These results tend to show that the devices do not measure the same phenomenon. The thermocouple appears more sensitive to the thermal response of the made-up surface whereas the MEMS sensor appears more sensitive to the heat transfers in the interface between the skin and make-up.

Load monitoring of aerospace structures utilizing micro-electro-mechanical systems for static and quasi-static loading conditions

NASA Astrophysics Data System (ADS)

Martinez, M.; Rocha, B.; Li, M.; Shi, G.; Beltempo, A.; Rutledge, R.; Yanishevsky, M.

2012-11-01

The National Research Council Canada (NRC) has worked on the development of structural health monitoring (SHM) test platforms for assessing the performance of sensor systems for load monitoring applications. The first SHM platform consists of a 5.5 m cantilever aluminum beam that provides an optimal scenario for evaluating the ability of a load monitoring system to measure bending, torsion and shear loads. The second SHM platform contains an added level of structural complexity, by consisting of aluminum skins with bonded/riveted stringers, typical of an aircraft lower wing structure. These two load monitoring platforms are well characterized and documented, providing loading conditions similar to those encountered during service. In this study, a micro-electro-mechanical system (MEMS) for acquiring data from triads of gyroscopes, accelerometers and magnetometers is described. The system was used to compute changes in angles at discrete stations along the platforms. The angles obtained from the MEMS were used to compute a second, third or fourth order degree polynomial surface from which displacements at every point could be computed. The use of a new Kalman filter was evaluated for angle estimation, from which displacements in the structure were computed. The outputs of the newly developed algorithms were then compared to the displacements obtained from the linear variable displacement transducers connected to the platforms. The displacement curves were subsequently post-processed either analytically, or with the help of a finite element model of the structure, to estimate strains and loads. The estimated strains were compared with baseline strain gauge instrumentation installed on the platforms. This new approach for load monitoring was able to provide accurate estimates of applied strains and shear loads.

Modelling and testing of a piezoelectric ultrasonic micro-motor suitable for in vivo micro-robotic applications

NASA Astrophysics Data System (ADS)

Watson, B.; Friend, J.; Yeo, L.

2010-11-01

A piezoelectric ultrasonic resonant micro-motor is developed with a stator diameter of 241 μm and an overall diameter of 400 μm. The motor is shown to produce a start-up torque of 1.2 nN m and a peak output power of 0.25 μW as designed, with a preload of 46.6 μN. An increase in preload to 2264 μN improved the performance to a start-up torque of 29 nN m and a peak output power of 9.1 μW. The motor is five times smaller than the current smallest piezoelectric ultrasonic resonant motor produced by Kanda et al. The motor is designed to operate at approximately 771 kHz, matching the fundamental axial, second harmonic torsional and electro-mechanical resonant frequencies. This is achieved through the use of a novel design process that uses scaling theories to greatly reduce the computational time to design the device. The resultant size and performance of the motor make it the first motor design capable of meeting the requirements of a drive system in a tetherless swimming in vivo micro-robot.

In-situ synchrotron micro-diffraction study of surface, interface, grain structure, and strain/stress evolution during Sn whisker/hillock formation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Pei, Fei; Jadhav, Nitin; Buchovecky, Eric

2016-03-14

We have performed X-ray synchrotron micro-diffraction measurements to study the processes controlling the formation of hillocks and whiskers in Sn layers on Cu. The studies were done in real-time on Sn layers that were electro-deposited immediately before the X-ray measurements were started. This enabled a region of the sample to be monitored from the as-deposited state until after a hillock feature formed. In addition to measuring the grain orientation and deviatoric strain (via Laue diffraction), the X-ray fluorescence was monitored to quantify the evolution of the Sn surface morphology and the formation of intermetallic compound (IMC) at the Sn-Cu interface.more » The results capture the simultaneous growth of the feature and the corresponding film stress, grain orientation, and IMC formation. The observations are compared with proposed mechanisms for whisker/hillock growth and nucleation.« less

Deep Reactive Ion Etching (DRIE) of High Aspect Ratio SiC Microstructures using a Time-Multiplexed Etch-Passivate Process

NASA Technical Reports Server (NTRS)

Evans, Laura J.; Beheim, Glenn M.

2006-01-01

High aspect ratio silicon carbide (SiC) microstructures are needed for microengines and other harsh environment micro-electro-mechanical systems (MEMS). Previously, deep reactive ion etching (DRIE) of low aspect ratio (AR less than or = 1) deep (greater than 100 micron) trenches in SiC has been reported. However, existing DRIE processes for SiC are not well-suited for definition of high aspect ratio features because such simple etch-only processes provide insufficient control over sidewall roughness and slope. Therefore, we have investigated the use of a time-multiplexed etch-passivate (TMEP) process, which alternates etching with polymer passivation of the etch sidewalls. An optimized TMEP process was used to etch high aspect ratio (AR greater than 5) deep (less than 100 micron) trenches in 6H-SiC. Power MEMS structures (micro turbine blades) in 6H-SiC were also fabricated.

Deformation analysis of MEMS structures by modified digital moiré methods

NASA Astrophysics Data System (ADS)

Liu, Zhanwei; Lou, Xinhao; Gao, Jianxin

2010-11-01

Quantitative deformation analysis of micro-fabricated electromechanical systems is of importance for the design and functional control of microsystems. In this paper, two modified digital moiré processing methods, Gaussian blurring algorithm combined with digital phase shifting and geometrical phase analysis (GPA) technique based on digital moiré method, are developed to quantitatively analyse the deformation behaviour of micro-electro-mechanical system (MEMS) structures. Measuring principles and experimental procedures of the two methods are described in detail. A digital moiré fringe pattern is generated by superimposing a specimen grating etched directly on a microstructure surface with a digital reference grating (DRG). Most of the grating noise is removed from the digital moiré fringes, which enables the phase distribution of the moiré fringes to be obtained directly. Strain measurement result of a MEMS structure demonstrates the feasibility of the two methods.

Plenoptic Imager for Automated Surface Navigation

NASA Technical Reports Server (NTRS)

Zollar, Byron; Milder, Andrew; Milder, Andrew; Mayo, Michael

2010-01-01

An electro-optical imaging device is capable of autonomously determining the range to objects in a scene without the use of active emitters or multiple apertures. The novel, automated, low-power imaging system is based on a plenoptic camera design that was constructed as a breadboard system. Nanohmics proved feasibility of the concept by designing an optical system for a prototype plenoptic camera, developing simulated plenoptic images and range-calculation algorithms, constructing a breadboard prototype plenoptic camera, and processing images (including range calculations) from the prototype system. The breadboard demonstration included an optical subsystem comprised of a main aperture lens, a mechanical structure that holds an array of micro lenses at the focal distance from the main lens, and a structure that mates a CMOS imaging sensor the correct distance from the micro lenses. The demonstrator also featured embedded electronics for camera readout, and a post-processor executing image-processing algorithms to provide ranging information.

Micromachined chemical jet dispenser

DOEpatents

Swierkowski, S.P.

1999-03-02

A dispenser is disclosed for chemical fluid samples that need to be precisely ejected in size, location, and time. The dispenser is a micro-electro-mechanical systems (MEMS) device fabricated in a bonded silicon wafer and a substrate, such as glass or silicon, using integrated circuit-like fabrication technology which is amenable to mass production. The dispensing is actuated by ultrasonic transducers that efficiently produce a pressure wave in capillaries that contain the chemicals. The 10-200 {micro}m diameter capillaries can be arranged to focus in one spot or may be arranged in a larger dense linear array (ca. 200 capillaries). The dispenser is analogous to some ink jet print heads for computer printers but the fluid is not heated, thus not damaging certain samples. Major applications are in biological sample handling and in analytical chemical procedures such as environmental sample analysis, medical lab analysis, or molecular biology chemistry experiments. 4 figs.

Utilizing optical coherence tomography for CAD/CAM of indirect dental restorations

NASA Astrophysics Data System (ADS)

Chityala, Ravishankar; Vidal, Carola; Jones, Robert

Optical Coherence Tomography (OCT) has seen broad application in dentistry including early carious lesion detection and imaging defects in resin composite restorations. This study investigates expanding the clinical usefulness by investigating methods to use OCT for obtaining three-dimensional (3D) digital impressions, which can be integrated to CAD/CAM manufacturing of indirect restorations. 3D surface topography `before' and `after' a cavity preparation was acquired by an intraoral cross polarization swept source OCT (CP-OCT) system with a Micro-Electro-Mechanical System (MEMS) scanning mirror. Image registration and segmentation methods were used to digitally construct a replacement restoration that modeled the original surface morphology of a hydroxyapatite sample. After high resolution additive manufacturing (e.g. polymer 3D printing) of the replacement restoration, micro-CT imaging was performed to examine the marginal adaptation. This study establishes the protocol for further investigation of integrating OCT with CAD/CAM of indirect dental restorations.

MEMS Technology for Space Applications

NASA Technical Reports Server (NTRS)

vandenBerg, A.; Spiering, V. L.; Lammerink, T. S. J.; Elwenspoek, M.; Bergveld, P.

1995-01-01

Micro-technology enables the manufacturing of all kinds of components for miniature systems or micro-systems, such as sensors, pumps, valves, and channels. The integration of these components into a micro-electro-mechanical system (MEMS) drastically decreases the total system volume and mass. These properties, combined with the increasing need for monitoring and control of small flows in (bio)chemical experiments, makes MEMS attractive for space applications. The level of integration and applied technology depends on the product demands and the market. The ultimate integration is process integration, which results in a one-chip system. An example of process integration is a dosing system of pump, flow sensor, micromixer, and hybrid feedback electronics to regulate the flow. However, for many applications, a hybrid integration of components is sufficient and offers the advantages of design flexibility and even the exchange of components in the case of a modular set up. Currently, we are working on hybrid integration of all kinds of sensors (physical and chemical) and flow system modules towards a modular system; the micro total analysis system (micro TAS). The substrate contains electrical connections as in a printed circuit board (PCB) as well as fluid channels for a circuit channel board (CCB) which, when integrated, form a mixed circuit board (MCB).

Modelling electro-active polymers with a dispersion-type anisotropy

NASA Astrophysics Data System (ADS)

Hossain, Mokarram; Steinmann, Paul

2018-02-01

We propose a novel constitutive framework for electro-active polymers (EAPs) that can take into account anisotropy with a chain dispersion. To enhance actuation behaviour, particle-filled EAPs become promising candidates nowadays. Recent studies suggest that particle-filled EAPs, which can be cured under an electric field during the manufacturing time, do not necessarily form perfect anisotropic composites, rather they create composites with dispersed chains. Hence in this contribution, an electro-mechanically coupled constitutive model is devised that considers the chain dispersion with a probability distribution function in an integral form. To obtain relevant quantities in discrete form, numerical integration over the unit sphere is utilized. Necessary constitutive equations are derived exploiting the basic laws of thermodynamics that result in a thermodynamically consistent formulation. To demonstrate the performance of the proposed electro-mechanically coupled framework, we analytically solve a non-homogeneous boundary value problem, the extension and inflation of an axisymmetric cylindrical tube under electro-mechanically coupled load. The results capture various electro-mechanical couplings with the formulation proposed for EAP composites.

Nano-material aspects of shock absorption in bone joints.

PubMed

Tributsch, H; Copf, F; Copf, P; Hindenlang, U; Niethard, F U; Schneider, R

2010-01-01

This theoretical study is based on a nano-technological evaluation of the effect of pressure on the composite bone fine structure. It turned out, that the well known macroscopic mechano-elastic performance of bones in combination with muscles and tendons is just one functional aspect which is critically supported by additional micro- and nano- shock damping technology aimed at minimising local bone material damage within the joints and supporting spongy bone material. The identified mechanisms comprise essentially three phenomena localised within the three-dimensional spongy structure with channels and so called perforated flexible tensulae membranes of different dimensions intersecting and linking them. Kinetic energy of a mechanical shock may be dissipated within the solid-liquid composite bone structure into heat via the generation of quasi-chaotic hydromechanic micro-turbulence. It may generate electro-kinetic energy in terms of electric currents and potentials. And the resulting specific structural and surface electrochemical changes may induce the compressible intra-osseal liquid to build up pressure dependent free chemical energy. Innovative bone joint prostheses will have to consider and to be adapted to the nano-material aspects of shock absorption in the operated bones.

Wear of the Charité® lumbar intervertebral disc replacement investigated using an electro-mechanical spine simulator

PubMed Central

Moghadas, Parshia; Shepherd, Duncan ET; Hukins, David WL

2015-01-01

The Charité® lumbar intervertebral disc replacement was subjected to wear testing in an electro-mechanical spine simulator. Sinusoidally varying compression (0.6–2 kN, frequency 2 Hz), rotation (±2°, frequency 1 Hz), flexion–extension (6° to −3°, frequency 1 Hz) and lateral bending (±2°, frequency 1 Hz) were applied out of phase to specimens immersed in diluted calf serum at 37 °C. The mass of the ultra-high-molecular weight polyethylene component of the device was measured at intervals of 0.5, 1, 2, 3, 4 and 5 million cycles; its volume was also measured by micro-computed tomography. Total mass and volume losses were 60.3 ± 4.6 mg (mean ± standard deviation) and 64.6 ± 6.0 mm3. Corresponding wear rates were 12.0 ± 1.4 mg per million cycles and 12.8 ± 1.2 mm3 per million cycles; the rate of loss of volume corresponds to a mass loss of 11.9 ± 1.1 mg per million cycles, that is, the two sets of measurements of wear agree closely. Wear rates also agree closely with measurements made in another laboratory using the same protocol but using a conventional mechanical spine simulator. PMID:25834002

Line trace micro-opto-electro-device

NASA Astrophysics Data System (ADS)

Yi, Deer; Lu, Si; Yan, Yingbai; Pang, Lin; Jin, Guofan

2001-05-01

Since micro robot has merits on small size and flexible movements, it could be used under many situations. A lot of novel designs of micro-robot have been developed recently. However, as miniaturizing the size of the micro-robot, the number of its sensor gets restricted. Then the information from the detectors becomes lack. This makes the micro robot difficult to acquire its status. A micro robot tracing a line has been designed in our lab. With the help of optoelectronic detection and logical algorithm, the micro robot could follow a black line printed on the white ground exactly. The micro robot's intelligence is realized through the program in its microprocessor. The technical details of the micro robot are as follows: dimensions: 30mm*25mm*35**; velocity: 60mm/s.

An opto-electro-mechanical system based on evanescently-coupled optical microbottle and electromechanical resonator

NASA Astrophysics Data System (ADS)

Asano, Motoki; Ohta, Ryuichi; Yamamoto, Takashi; Okamoto, Hajime; Yamaguchi, Hiroshi

2018-05-01

Evanescent coupling between a high-Q silica optical microbottle and a GaAs electromechanical resonator is demonstrated. This coupling offers an opto-electro-mechanical system which possesses both cavity-enhanced optical sensitivity and electrical controllability of the mechanical motion. Cooling and heating of the mechanical mode are demonstrated based on optomechanical detection via the radiation pressure and electromechanical feedback via the piezoelectric effect. This evanescent approach allows for individual design of optical, mechanical, and electrical systems, which could lead to highly sensitive and functionalized opto-electro-mechanical systems.

Application of micro- and nanotechnologies for the fabrication of optical devices

NASA Astrophysics Data System (ADS)

Ehrfeld, Wolfgang; Bauer, Hans-Dieter

1998-03-01

The development of micro-opto-electro-mechanical systems (MOEMS) and devices no longer focuses on feasibility studies and expensive demonstrators. On the contrary, fabrication of micro-optical components is already feeding dynamic markets with a large variety of products that are more or less on the verge of inexpensive mass production. A major application area for MOEMS is, without any doubt, tele- and datacommunications, while miniature optical sensors (e.g. spectrometers and interferometers) have a growing part in many kinds of biotechnological, chemical and pharmaceutical applications. In this presentation numerous examples for optical microstructures are given that range from the field of low cost fiberoptic components to polymer waveguide elements, from fiber switches to mass-producible microlenses made of thermoplastics or glass, and from microstructured photonic bandgap materials to optical sensor tips for investigating nanostructures. It is emphasized that for realizing MOEMS very different materials have to be processed while the necessary hybrid integration demands for specific automated assembly methods. In particular, the examples given show now microtechnologies can be adapted and combined with each other to take into account the special requirements of the product.

Micro-hole array fluorescent sensor based on AC-Dielectrophoresis (DEP) for simultaneous analysis of nano-molecules

NASA Astrophysics Data System (ADS)

Kim, Hye Jin; Kang, Dong-Hoon; Lee, Eunji; Hwang, Kyo Seon; Shin, Hyun-Joon; Kim, Jinsik

2018-02-01

We propose a simple fluorescent bio-chip based on two types of alternative current-dielectrophoretic (AC-DEP) force, attractive (positive DEP) and repulsive (negative DEP) force, for simultaneous nano-molecules analysis. Various radius of micro-holes on the bio-chip are designed to apply the different AC-DEP forces, and the nano-molecules are concentrated inside the micro-hole arrays according to the intensity of the DEP force. The bio-chip was fabricated by Micro Electro Mechanical system (MEMS) technique, and was composed of two layers; a SiO2 layer and Ta/Pt layer were accomplished for an insulation layer and a top electrode with micro-hole arrays to apply electric fields for DEP force, respectively. Each SiO2 and Ta/Pt layers were deposited by thermal oxidation and sputtering, and micro-hole arrays were fabricated with Inductively Coupled Plasma (ICP) etching process. For generation of each positive and negative DEP at micro-holes, we applied two types of sine-wave AC voltage with different frequency range alternately. The intensity of the DEP force was controlled by the radius of the micro-hole and size of nano-molecule, and calculated with COMSOL multi-physics. Three types of nano-molecules labelled with different fluorescent dye were used and the intensity of nano-molecules was examined by the fluorescent optical analysis after applying the DEP force. By analyzing the fluorescent intensities of the nano-molecules, we verify the various nano-molecules in analyte are located successfully inside corresponding micro-holes with different radius according to their size.

Liquid metal micro heat pipes for space radiator applications

NASA Technical Reports Server (NTRS)

Gerner, F. M.; Henderson, H. T.

1995-01-01

Micromachining is a chemical means of etching three-dimensional structures, typically in single-crystalline silicon. These techniques are leading toward what is coming to be referred to as MEMS (micro electro mechanical systems), where in addition to the ordinary two dimensional (planar) microelectronics, it is possible to build three-dimensional micromotors, electrically-actuated microvalves, hydraulic systems, and much more on the same microchip. These techniques become possible because of differential etching rates of various crystallographic planes and materials used for semiconductor microfabrication. The University of Cincinnati group in collaboration with NASA Lewis formed micro heat pipes in silicon by the above techniques. Work is ongoing at a modest level, but several essential bonding and packaging techniques have been recently developed. Currently, we have constructed and filled water/silicon micro heat pipes. Preliminary thermal tests of arrays of 125 micro heat pipes etched in a 1 inch x 1 inch x 250 micron silicon wafer have been completed. These pipes are instrumented with extremely small P-N junctions to measure their effective conductivity and their maximum operating power. A relatively simple one-dimensional model has been developed in order to predict micro heat pipes' operating characteristics. This information can be used to optimize micro heat pipe design with respect to length, hydraulic diameter, and number of pipes. Work is progressing on the fabrication of liquid-metal micro heat pipes. In order to be compatible with liquid metal (sodium or potassium), the inside of the micro heat pipes will be coated with a refractory metal (such as tungsten, molybdenum, or titanium).

Electrical and mechanical characterization of nanoscale-layered cellulose-based electro-active paper.

PubMed

Yun, Gyu-Young; Yun, Ki-Ju; Kim, Joo-Hyung; Kim, Jaehwan

2011-01-01

In order to understand the electro-mechanical behavior of piezoelectric electro active paper (EAPap), the converse and direct piezoelectric characterization of cellulose EAPap was studied and compared. A delay between the electrical field and the induced strain of EAPap was observed due to the inner nano-voids or the localized amorphous regions in layer-by-layered structure to capture or hold the electrical charges and remnant ions. The linear relation between electric field and induced strain is also observed. The electro-mechanical performance of EAPap is discussed in detail in this paper.

Microfabricated Chemical Sensors for Safety and Emission Control Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Knight, D.; Liu, C. C.; Wu, Q. H.

1998-01-01

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

MEMS tracking mirror system for a bidirectional free-space optical link.

PubMed

Jeon, Sungho; Toshiyoshi, Hiroshi

2017-08-20

We report on a bidirectional free-space optical system that is capable of automatic connection and tracking of an optical link between two nodes. A piezoelectric micro-electro-mechanical systems (MEMS) optical scanner is used to steer a laser beam of two wavelengths superposed to visually present a communication zone, to search for the position of the remote node by means of the retro-reflector optics, and to transmit the data between the nodes. A feedback system is developed to control the MEMS scanner to dynamically establish the optical link within a 10-ms transition time and to keep track of the moving node.

In-situ realtime monitoring of nanoscale gold electroplating using micro-electro-mechanical systems liquid cell operating in transmission electron microscopy

DOE Office of Scientific and Technical Information (OSTI.GOV)

Egawa, Minoru; Fujita, Hiroyuki; Ishida, Tadashi, E-mail: ishida.t.ai@m.titech.ac.jp

2016-01-11

The dynamics of nanoscale electroplating between gold electrodes was investigated using a microfabricated liquid cell mounted on a scanning transmission electron microscope. The electroplating was recorded in-situ for 10 min with a spatial resolution higher than 6 nm. At the beginning of the electroplating, gold spike-like structures of about 50 nm in size grew from an electrode, connected gold nanoclusters around them, and form three dimensional nanoscale structures. We visualized the elementary process of the gold electroplating, and believe that the results lead to the deeper understanding of electroplating at the nanoscale.

Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness

PubMed Central

Frangi, Attilio; Guerrieri, Andrea; Boni, Nicoló

2017-01-01

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach. PMID:28383483

Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.

PubMed

Frangi, Attilio; Guerrieri, Andrea; Boni, Nicoló

2017-04-06

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.

Cascade unlooping of a low-pitch helical spring under tension

NASA Astrophysics Data System (ADS)

Starostin, E. L.; van der Heijden, G. H. M.

2009-06-01

We study the force vs. extension behaviour of a helical spring made of a thin torsionally stiff anisotropic elastic rod. Our focus is on springs of very low helical pitch. For certain parameters of the problem such a spring is found not to unwind when pulled but rather to form hockles that pop out one by one and lead to a highly non-monotonic force-extension curve. Between abrupt loop pop-outs this curve is well described by the planar elastica whose relevant solutions are classified. Our results may be relevant for tightly coiled nanosprings in future micro- and nano(electro)mechanical devices.

The Fundamentals of Using the Digital Micromirror Device (DMD(TM)) for Projection Display

NASA Technical Reports Server (NTRS)

Yoder, Lars A.

1995-01-01

Developed by Texas Instruments (TI) the digital micromirror device (DMD(tm)) is a quickly emerging and highly useful micro-electro-mechanical structures (MEMS) device. Using standard semiconductor fabrication technology, the DMD's simplicity in concept and design will provide advantageous solutions for many different applications. At the rudimentary level, the DMD is a precision, semiconductor light switch. In the initial commercial development of DMD technology, TI has concentrated on projection display and hardcopy. This paper will focus on how the DMD is used for projection display. Other application areas are being explored and evaluated to find appropriate and beneficial uses for the DMD.

MEMS piezoresistive cantilever for the direct measurement of cardiomyocyte contractile force

NASA Astrophysics Data System (ADS)

Matsudaira, Kenei; Nguyen, Thanh-Vinh; Hirayama Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

2017-10-01

This paper reports on a method to directly measure the contractile forces of cardiomyocytes using MEMS (micro electro mechanical systems)-based force sensors. The fabricated sensor chip consists of piezoresistive cantilevers that can measure contractile forces with high frequency (several tens of kHz) and high sensing resolution (less than 0.1 nN). Moreover, the proposed method does not require a complex observation system or image processing, which are necessary in conventional optical-based methods. This paper describes the design, fabrication, and evaluation of the proposed device and demonstrates the direct measurements of contractile forces of cardiomyocytes using the fabricated device.

Reducing adhesion energy of micro-relay electrodes by ion beam synthesized oxide nanolayers

DOE PAGES

Saha, Bivas; Peschot, Alexis; Osoba, Benjamin; ...

2017-03-09

Reduction in the adhesion energy of contacting metal electrode surfaces in nano-electro-mechanical switches is crucial for operation with low hysteresis voltage. We demonstrate that by forming thin layers of metal-oxides on metals such as Ru and W, the adhesion energy can be reduced by up to a factor of ten. We employ a low-energy ion-beam synthesis technique and subsequent thermal annealing to form very thin layers (~2 nm) of metal-oxides (such as RuO 2 and WO x) on Ru and W metal surfaces and quantify the adhesion energy using an atomic force microscope with microspherical tips.

Lumped-parameters equivalent circuit for condenser microphones modeling.

PubMed

Esteves, Josué; Rufer, Libor; Ekeom, Didace; Basrour, Skandar

2017-10-01

This work presents a lumped parameters equivalent model of condenser microphone based on analogies between acoustic, mechanical, fluidic, and electrical domains. Parameters of the model were determined mainly through analytical relations and/or finite element method (FEM) simulations. Special attention was paid to the air gap modeling and to the use of proper boundary condition. Corresponding lumped-parameters were obtained as results of FEM simulations. Because of its simplicity, the model allows a fast simulation and is readily usable for microphone design. This work shows the validation of the equivalent circuit on three real cases of capacitive microphones, including both traditional and Micro-Electro-Mechanical Systems structures. In all cases, it has been demonstrated that the sensitivity and other related data obtained from the equivalent circuit are in very good agreement with available measurement data.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si₃N₄ Bimorph Microcantilevers for Static Mode Sensing.

PubMed

Kang, Seok-Won; Fragala, Joe; Kim, Su-Ho; Banerjee, Debjyoti

2017-11-01

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si₃N₄ microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing

PubMed Central

Kim, Su-Ho; Banerjee, Debjyoti

2017-01-01

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers. PMID:29104265

Mass and charge transport in IPMC actuators with fractal interfaces

NASA Astrophysics Data System (ADS)

Chang, Longfei; Wu, Yucheng; Zhu, Zicai; Li, Heng

2016-04-01

Ionic Polymer-Metal Composite (IPMC) actuators have been attracting a growing interest in extensive applications, which consequently raises the demands on the accuracy of its theoretical modeling. For the last few years, rough landscape of the interface between the electrode and the ionic membrane of IPMC has been well-documented as one of the key elements to ensure a satisfied performance. However, in most of the available work, the interface morphology of IPMC was simplified with structural idealization, which lead to perplexity in the physical interpretation on its interface mechanism. In this paper, the quasi-random rough interface of IPMC was described with fractal dimension and scaling parameters. And the electro-chemical field was modeled by Poisson equation and a properly simplified Nernst-Planck equation set. Then, by simulation with Finite Element Method, a comprehensive analysis on he inner mass and charge transportation in IPMC actuators with different fractal interfaces was provided, which may be further adopted to instruct the performance-oriented interface design for ionic electro-active actuators. The results also verified that rough interface can impact the electrical and mechanical response of IPMC, not only from the respect of the real surface increase, but also from mass distribution difference caused by the complexity of the micro profile.

Printed Biopolymer-Based Electro-Optic Device Components

DTIC Science & Technology

2013-07-01

devices and fabricated e-beam lithography-based master molds. Printed micro and nanostructures using a newly developed spin-on nanoprinting (SNAP...polymeric materials. Among the natural biopolymers , deoxyribonucleic acid (DNA) is an attractive material which can be used to make electronic and...photonic devices [2, 3]. If patterned on the micro and nanoscale using a soft lithography technique, high quality biodegradable optical devices can be

Vision for Micro Technology Space Missions. Chapter 2

NASA Technical Reports Server (NTRS)

Dennehy, Neil

2005-01-01

It is exciting to contemplate the various space mission applications that Micro Electro Mechanical Systems (MEMS) technology could enable in the next 10-20 years. The primary objective of this chapter is to both stimulate ideas for MEMS technology infusion on future NASA space missions and to spur adoption of the MEMS technology in the minds of mission designers. This chapter is also intended to inform non-space oriented MEMS technologists, researchers and decision makers about the rich potential application set that future NASA Science and Exploration missions will provide. The motivation for this chapter is therefore to lead the reader down a path to identify and it is exciting to contemplate the various space mission applications that Micro Electro Mechanical Systems (MEMS) technology could enable in the next 10-20 years. The primary objective of this chapter is to both stimulate ideas for MEMS technology infusion on future NASA space missions and to spur adoption of the MEMS technology in the minds of mission designers. This chapter is also intended to inform non-space oriented MEMS technologists, researchers and decision makers about the rich potential application set that future NASA Science and Exploration missions will provide. The motivation for this chapter is therefore to lead the reader down a path to identify and consider potential long-term, perhaps disruptive or revolutionary, impacts that MEMS technology may have for future civilian space applications. A general discussion of the potential for MEMS in space applications is followed by a brief showcasing of a few selected examples of recent MEMS technology developments for future space missions. Using these recent developments as a point of departure, a vision is then presented of several areas where MEMS technology might eventually be exploited in future Science and Exploration mission applications. Lastly, as a stimulus for future research and development, this chapter summarizes a set of barriers to progress, design challenges and key issues that must be overcome in order for the community to move on, from the current nascent phase of developing and infusing MEMS technology into space missions, in order to achieve its full future potential.

Quantitative Accelerated Life Testing of MEMS Accelerometers

PubMed Central

Bâzu, Marius; Gălăţeanu, Lucian; Ilian, Virgil Emil; Loicq, Jerome; Habraken, Serge; Collette, Jean-Paul

2007-01-01

Quantitative Accelerated Life Testing (QALT) is a solution for assessing the reliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shown in this paper and an attempt to assess the reliability level for a batch of MEMS accelerometers is reported. The testing plan is application-driven and contains combined tests: thermal (high temperature) and mechanical stress. Two variants of mechanical stress are used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tilting and high temperature is used. Tilting is appropriate as application-driven stress, because the tilt movement is a natural environment for devices used for automotive and aerospace applications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The test results demonstrated the excellent reliability of the studied devices, the failure rate in the “worst case” being smaller than 10-7h-1. PMID:28903265

Performance assessment of MEMS adaptive optics in tactical airborne systems

NASA Astrophysics Data System (ADS)

Tyson, Robert K.

1999-09-01

Tactical airborne electro-optical systems are severely constrained by weight, volume, power, and cost. Micro- electrical-mechanical adaptive optics provide a solution that addresses the engineering realities without compromising spatial and temporal compensation requirements. Through modeling and analysis, we determined that substantial benefits could be gained for laser designators, ladar, countermeasures, and missile seekers. The developments potential exists for improving seeker imagery resolution 20 percent, extending countermeasures keep-out range by a factor of 5, doubling the range for ladar detection and identification, and compensating for supersonic and hypersonic aircraft boundary layers. Innovative concepts are required for atmospheric pat hand boundary layer compensation. We have developed design that perform these tasks using high speed scene-based wavefront sensing, IR aerosol laser guide stars, and extended-object wavefront beacons. We have developed a number of adaptive optics system configurations that met the spatial resolution requirements and we have determined that sensing and signal processing requirements can be met. With the help of micromachined deformable mirrors and sensor, we will be able to integrate the systems into existing airborne pods and missiles as well as next generation electro-optical systems.

Droplet Microfluidics for Chip-Based Diagnostics

PubMed Central

Kaler, Karan V. I. S.; Prakash, Ravi

2014-01-01

Droplet microfluidics (DMF) is a fluidic handling technology that enables precision control over dispensing and subsequent manipulation of droplets in the volume range of microliters to picoliters, on a micro-fabricated device. There are several different droplet actuation methods, all of which can generate external stimuli, to either actively or passively control the shape and positioning of fluidic droplets over patterned substrates. In this review article, we focus on the operation and utility of electro-actuation-based DMF devices, which utilize one or more micro-/nano-patterned substrates to facilitate electric field-based handling of chemical and/or biological samples. The underlying theory of DMF actuations, device fabrication methods and integration of optical and opto-electronic detectors is discussed in this review. Example applications of such electro-actuation-based DMF devices have also been included, illustrating the various actuation methods and their utility in conducting chip-based laboratory and clinical diagnostic assays. PMID:25490590

Electro therapy facial and laser skin whitening: Clients' perspective.

PubMed

Lavanya, D; Manimaran, S; Bhagyalakshmi, K

2018-01-01

There are so many beauty salons in Metropolis who provide services to women exclusively [1]. These beauty salons depend mostly on electricity for their services to customers, without it there is no effective means of operation [2]. These beauty salons are definitely leading to women empowerment. The beauty salons are run by the women for women. Since they fall under the category of micro and small enterprises, these salons may avail so many financial and non- financial advantages from the Government of India. They also provide employment opportunities to the women employees. The development of such beauty salons rests on the clients' satisfaction on the provision of their services. Hence it is essential to measure the clients attitude towards the services offered by the beauty salons, especially electro therapy facial, laser skin whitening and laser hair removal treatments, which are coming under micro current treatment as a cosmetic tool.

Development of dielectrophoresis MEMS device for PC12 cell patterning to elucidate nerve-network generation

NASA Astrophysics Data System (ADS)

Nakamachi, Eiji; Koga, Hirotaka; Morita, Yusuke; Yamamoto, Koji; Sakamoto, Hidetoshi

2018-01-01

We developed a PC12 cell trapping and patterning device by combining the dielectrophoresis (DEP) methodology and the micro electro mechanical systems (MEMS) technology for time-lapse observation of morphological change of nerve network to elucidate the generation mechanism of neural network. We succeeded a neural network generation, which consisted of cell body, axon and dendrites by using tetragonal and hexagonal cell patterning. Further, the time laps observations was carried out to evaluate the axonal extension rate. The axon extended in the channel and reached to the target cell body. We found that the shorter the PC12 cell distance, the less the axonal connection time in both tetragonal and hexagonal structures. After 48 hours culture, a maximum success rate of network formation was 85% in the case of 40 μm distance tetragonal structure.

Structure characterization and wear performance of NiTi thermal sprayed coatings

NASA Astrophysics Data System (ADS)

Cinca, N.; Isalgué, A.; Fernández, J.; Guilemany, J. M.

2010-08-01

NiTi shape memory alloy (SMA) has been studied for many years for its shape memory and pseudoelastic properties, as well as its biocompatibility, which make it suitable for many biomedical applications. However, SMA NiTi is also interesting for relevant wear resistance near the transition temperature which, along with its high oxidation and corrosion resistance, suggests its use as a coating to increase the lifetime of some components. Also, whereas bulk material properties have been characterized in respect of the nominal composition, manufacturing methods and thermo-mechanical treatments, NiTi overlays have been investigated much less. Most existent works in this field specifically deal with magnetron sputtering technology for thin films and its use in micro-devices (micro-electro-mechanical systems, MEMS), just some works refer to vacuum plasma spraying (VPS) for thicker coatings. The present paper explores and compares the microstructure and wear-related properties of coatings obtained from atomized NiTi powders, by VPS as well as by atmospheric plasma spraying (APS) and high velocity oxygen fuel (HVOF) techniques. In the present case, the wear behaviour of the NiTi deposits has been studied by rubber-wheel equipment and ball-on-disk tests. The results obtained at room temperature show that the APS-quenched coatings exhibit a preferential dry sliding wear mechanism, while the VPS and HVOF coatings show an abrasive mechanism.

Characterization of nonplanar motion in MEMS involving scanning laser interferometry

NASA Astrophysics Data System (ADS)

Lawton, Russell A.; Abraham, Margaret H.; Lawrence, Eric

1999-08-01

A study to evaluate three processes used for the release of standard devices produced by MCNC using the MUMPS process was undertaken by Jet Propulsion Laboratory with the collaboration of The Aerospace Corporation, and Polytec PI. The processes used were developed at various laboratories and are commonly the final step in the production of micro- electro-mechanical systems prior to packaging. It is at this stage of the process when the devices become extremely delicate and are subject to yield losses due to handling errors or the phenomenon of stiction. The effects of post processing with HF on gain boundaries and subsequent thermal processing producing native oxide growth during packaging will require further investigation.

Laser heating of aqueous samples on a micro-optical-electro-mechanical system

DOEpatents

Beer, Neil Reginald; Kennedy, Ian

2013-12-17

A system of heating a sample on a microchip includes the steps of providing a microchannel flow channel in the microchip; positioning the sample within the microchannel flow channel, providing a laser that directs a laser beam onto the sample for heating the sample; providing the microchannel flow channel with a wall section that receives the laser beam and enables the laser beam to pass through wall section of the microchannel flow channel without being appreciably heated by the laser beam; and providing a carrier fluid in the microchannel flow channel that moves the sample in the microchannel flow channel wherein the carrier fluid is not appreciably heated by the laser beam.

Laser heating of aqueous samples on a micro-optical-electro-mechanical system

DOEpatents

Beer, Neil Reginald; Kennedy, Ian

2013-02-05

A system of heating a sample on a microchip includes the steps of providing a microchannel flow channel in the microchip; positioning the sample within the microchannel flow channel, providing a laser that directs a laser beam onto the sample for heating the sample; providing the microchannel flow channel with a wall section that receives the laser beam and enables the laser beam to pass through wall section of the microchannel flow channel without being appreciably heated by the laser beam; and providing a carrier fluid in the microchannel flow channel that moves the sample in the microchannel flow channel wherein the carrier fluid is not appreciably heated by the laser beam.

Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging

NASA Astrophysics Data System (ADS)

Chee, J.; Hwu, J.; Kim, T. S.; Kubby, J.; Velicu, S.; Gupta, N.

2015-02-01

Focal plane array (FPA) technology is mature and is widely used for imaging applications. However, FPAs have broadband responses which limit their ability to provide high performance in hyperspectral applications such as detection of buried explosives, and identifying the presence of explosive chemicals and their concentrations. EPIR is currently developing Micro-Opto-Electro-Mechanical System (MOEMS) Fabry-Perot interferometer filter (FPF) devices for FPAs. In this paper, we present our approach to MOEMS FPF design and fabrication that will meet the size requirements for large format FPA hyperspectral imaging. We also report the performance of our FPF resonance cavity, capable of up to 3 μm change gap in tens of nanometer increments.

Efficient optical cloud removal technique for earth observation based on MOEMs device

NASA Astrophysics Data System (ADS)

Zamkotsian, Frédéric; Lanzoni, Patrick; Liotard, Arnaud; Viard, Thierry; Noell, Wilfried

2017-11-01

In Earth Observation instruments, observation of scenes including bright sources leads to an important degradation of the recorded signal. We propose a new concept to remove dynamically the bright sources and then obtain a field of view with an optically enhanced Signal-to-Noise Ratio (SNR). Micro-Opto-Electro-Mechanical Systems (MOEMS) could be key components in future generation of space instruments. MOEMS-based programmable slit masks will permit the straylight control in future Earth Observation instruments. Experimental demonstration of this concept has been conducted on a dedicated bench. This successful first demonstration shows the high potential of this new concept in future spectro-imager for Earth Observation.

Micromachined silicon cantilevers with integrated high-frequency magnetoimpedance sensors for simultaneous strain and magnetic field detection

NASA Astrophysics Data System (ADS)

Buettel, G.; Joppich, J.; Hartmann, U.

2017-12-01

Giant magnetoimpedance (GMI) measurements in the high-frequency regime utilizing a coplanar waveguide with an integrated Permalloy multilayer and micromachined on a silicon cantilever are reported. The fabrication process is described in detail. The aspect ratio of the magnetic multilayer in the magnetoresistive and magnetostrictive device was varied. Tensile strain and compressive strain were applied. Vector network analyzer measurements in the range from the skin effect to ferromagnetic resonance confirm the technological potential of GMI-based micro-electro-mechanical devices for strain and magnetic field sensing applications. The strain-impedance gauge factor was quantified by finite element strain calculations and reaches a maximum value of almost 200.

Optical characterization of high speed microscanners based on static slit profiling method

NASA Astrophysics Data System (ADS)

Alaa Elhady, A.; Sabry, Yasser M.; Khalil, Diaa

2017-01-01

Optical characterization of high-speed microscanners is a challenging task that usually requires special high speed, extremely expensive camera systems. This paper presents a novel simple method to characterize the scanned beam spot profile and size in high-speed optical scanners under operation. It allows measuring the beam profile and the spot sizes at different scanning angles. The method is analyzed theoretically and applied experimentally on the characterization of a Micro Electro Mechanical MEMS scanner operating at 2.6 kHz. The variation of the spot size versus the scanning angle, up to ±15°, is extracted and the dynamic bending curvature effect of the micromirror is predicted.

Initial performance results for high-aspect ratio gold MEMS deformable mirrors

NASA Astrophysics Data System (ADS)

Fernández, Bautista; Kubby, Joel

2009-02-01

The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.

Attitude algorithm and initial alignment method for SINS applied in short-range aircraft

NASA Astrophysics Data System (ADS)

Zhang, Rong-Hui; He, Zhao-Cheng; You, Feng; Chen, Bo

2017-07-01

This paper presents an attitude solution algorithm based on the Micro-Electro-Mechanical System and quaternion method. We completed the numerical calculation and engineering practice by adopting fourth-order Runge-Kutta algorithm in the digital signal processor. The state space mathematical model of initial alignment in static base was established, and the initial alignment method based on Kalman filter was proposed. Based on the hardware in the loop simulation platform, the short-range flight simulation test and the actual flight test were carried out. The results show that the error of pitch, yaw and roll angle is fast convergent, and the fitting rate between flight simulation and flight test is more than 85%.

An analytical-numerical method for determining the mechanical response of a condenser microphone

PubMed Central

Homentcovschi, Dorel; Miles, Ronald N.

2011-01-01

The paper is based on determining the reaction pressure on the diaphragm of a condenser microphone by integrating numerically the frequency domain Stokes system describing the velocity and the pressure in the air domain beneath the diaphragm. Afterwards, the membrane displacement can be obtained analytically or numerically. The method is general and can be applied to any geometry of the backplate holes, slits, and backchamber. As examples, the method is applied to the Bruel & Kjaer (B&K) 4134 1/2-inch microphone determining the mechanical sensitivity and the mechano-thermal noise for a domain of frequencies and also the displacement field of the membrane for two specified frequencies. These elements compare well with the measured values published in the literature. Also a new design, completely micromachined (including the backvolume) of the B&K micro-electro-mechanical systems (MEM) 1/4-inch measurement microphone is proposed. It is shown that its mechanical performances are very similar to those of the B&K MEMS measurement microphone. PMID:22225026

An analytical-numerical method for determining the mechanical response of a condenser microphone.

PubMed

Homentcovschi, Dorel; Miles, Ronald N

2011-12-01

The paper is based on determining the reaction pressure on the diaphragm of a condenser microphone by integrating numerically the frequency domain Stokes system describing the velocity and the pressure in the air domain beneath the diaphragm. Afterwards, the membrane displacement can be obtained analytically or numerically. The method is general and can be applied to any geometry of the backplate holes, slits, and backchamber. As examples, the method is applied to the Bruel & Kjaer (B&K) 4134 1/2-inch microphone determining the mechanical sensitivity and the mechano-thermal noise for a domain of frequencies and also the displacement field of the membrane for two specified frequencies. These elements compare well with the measured values published in the literature. Also a new design, completely micromachined (including the backvolume) of the B&K micro-electro-mechanical systems (MEM) 1/4-inch measurement microphone is proposed. It is shown that its mechanical performances are very similar to those of the B&K MEMS measurement microphone. © 2011 Acoustical Society of America

Nano-Material Aspects of Shock Absorption in Bone Joints

PubMed Central

Tributsch, H; Copf, F; Copf, p; Hindenlang, U; Niethard, F.U; Schneider, R

2010-01-01

This theoretical study is based on a nano-technological evaluation of the effect of pressure on the composite bone fine structure. It turned out, that the well known macroscopic mechano-elastic performance of bones in combination with muscles and tendons is just one functional aspect which is critically supported by additional micro- and nano- shock damping technology aimed at minimising local bone material damage within the joints and supporting spongy bone material. The identified mechanisms comprise essentially three phenomena localised within the three–dimensional spongy structure with channels and so called perforated flexible tensulae membranes of different dimensions intersecting and linking them. Kinetic energy of a mechanical shock may be dissipated within the solid-liquid composite bone structure into heat via the generation of quasi-chaotic hydromechanic micro-turbulence. It may generate electro-kinetic energy in terms of electric currents and potentials. And the resulting specific structural and surface electrochemical changes may induce the compressible intra-osseal liquid to build up pressure dependent free chemical energy. Innovative bone joint prostheses will have to consider and to be adapted to the nano-material aspects of shock absorption in the operated bones. PMID:21625375

Optical switch based on thermocapillarity

NASA Astrophysics Data System (ADS)

Sakata, Tomomi; Makihara, Mitsuhiro; Togo, Hiroyoshi; Shimokawa, Fusao; Kaneko, Kazumasa

2001-11-01

Space-division optical switches are essential for the protection, optical cross-connects (OXCs), and optical add/drop multiplexers (OADMs) needed in future fiber-optic communication networks. For applications in these areas, we proposed a thermocapillarity switch called oil-latching interfacial-tension variation effect (OLIVE) switch. An OLIVE switch is a micro-mechanical optical switch fabricated on planar lightwave circuits (PLC) using micro-electro-mechanical systems (MEMS) technology. It consists of a crossing waveguide that has a groove at each crossing point and a pair of microheaters. The groove is partially filled with the refractive-index-matching liquid, and optical signals are switched according to the liquid's position in the groove, i.e., whether it is passing straight through the groove or reflecting at the sidewall of the groove. The liquid is driven by thermocapillarity and latched by capillarity. Using the total internal reflection to switch the optical path, the OLIVE switch exhibits excellent optical characteristics, such as high transparency (insertion loss: < 2 dB), high extinction ratio (> 50 dB), and low crosstalk (< -50 dB). Moreover, since this switch has a simple structure and bi-stability, it has wide variety of applications in wavelength division multiplexing (WDM) networks.

Diatom Valve Three-Dimensional Representation: A New Imaging Method Based on Combined Microscopies

PubMed Central

Ferrara, Maria Antonietta; De Tommasi, Edoardo; Coppola, Giuseppe; De Stefano, Luca; Rea, Ilaria; Dardano, Principia

2016-01-01

The frustule of diatoms, unicellular microalgae, shows very interesting photonic features, generally related to its complicated and quasi-periodic micro- and nano-structure. In order to simulate light propagation inside and through this natural structure, it is important to develop three-dimensional (3D) models for synthetic replica with high spatial resolution. In this paper, we present a new method that generates images of microscopic diatoms with high definition, by merging scanning electron microscopy and digital holography microscopy or atomic force microscopy data. Starting from two digital images, both acquired separately with standard characterization procedures, a high spatial resolution (Δz = λ/20, Δx = Δy ≅ 100 nm, at least) 3D model of the object has been generated. Then, the two sets of data have been processed by matrix formalism, using an original mathematical algorithm implemented on a commercially available software. The developed methodology could be also of broad interest in the design and fabrication of micro-opto-electro-mechanical systems. PMID:27690008

Thermoelectrokinetic instability in micro/nanoscales

NASA Astrophysics Data System (ADS)

Ganchenko, Georgy; Ganchenko, Natalia

2016-11-01

A novel sophisticated type of electro-hydrodynamic instability in an electrolyte solution near ion-selective surfaces in an external electric field is discovered theoretically. The key mechanism of the instability is caused by Joule heating but dramatically differs from the well-known Raleigh-Benard convection. The investigation is based on the Nernst-Planck-Poisson-Navier-Stokes system along with the energy equation and corresponding BCs. The 1D quiescent steady state in microscales can be unstable with respect to either short-wave Rubinstein-Zaltzman or long-wave thermoelectokinenetic instability. The last one prevails in long microchannels and good enough thermal insulation of the system. In addition to the linear stability analysis a direct numerical simulation of the full 3D nonlinear system is fulfilled using a parallel computing. In the final coherent structures salt concentration, temperature and electric current are localized in narrow long fingers normal to the ion-selective surface while space charge forms crown-like micro-patterns. The investigation results can be useful in desalination problem.

Design and Analysis of a Micromachined LC Low Pass Filter For 2.4GHz Application

NASA Astrophysics Data System (ADS)

Saroj, Samruddhi R.; Rathee, Vishal R.; Pande, Rajesh S.

2018-02-01

This paper reports design and analysis of a passive low pass filter with cut-off frequency of 2.4 GHz using MEMS (Micro Electro-Mechanical Systems) technology. The passive components such as suspended spiral inductors and metal-insulator-metal (MIM) capacitor are arranged in T network form to implement LC low pass filter design. This design employs a simple approach of suspension thereby reducing parasitic losses to eliminate the performance degrading effects caused by integrating an off-chip inductor in the filter circuit proposed to be developed on a low cost silicon substrate using RF-MEMS components. The filter occupies only 2.1 mm x 0.66 mm die area and is designed using micro-strip transmission line placed on a silicon substrate. The design is implemented in High Frequency Structural Simulator (HFSS) software and fabrication flow is proposed for its implementation. The simulated results show that the design has an insertion loss of -4.98 dB and return loss of -2.60dB.

Three-dimensional device characterization by high-speed cinematography

NASA Astrophysics Data System (ADS)

Maier, Claus; Hofer, Eberhard P.

2001-10-01

Testing of micro-electro-mechanical systems (MEMS) for optimization purposes or reliability checks can be supported by device visualization whenever an optical access is available. The difficulty in such an investigation is the short time duration of dynamical phenomena in micro devices. This paper presents a test setup to visualize movements within MEMS in real-time and in two perpendicular directions. A three-dimensional view is achieved by the combination of a commercial high-speed camera system, which allows to take up to 8 images of the same process with a minimum interframe time of 10 ns for the first direction, with a second visualization system consisting of a highly sensitive CCD camera working with a multiple exposure LED illumination in the perpendicular direction. Well synchronized this provides 3-D information which is treated by digital image processing to correct image distortions and to perform the detection of object contours. Symmetric and asymmetric binary collisions of micro drops are chosen as test experiments, featuring coalescence and surface rupture. Another application shown here is the investigation of sprays produced by an atomizer. The second direction of view is a prerequisite for this measurement to select an intended plane of focus.

Reduced Graphene Oxide-Containing Smart Hydrogels with Excellent Electro-Response and Mechanical Properties for Soft Actuators.

PubMed

Yang, Chao; Liu, Zhuang; Chen, Chen; Shi, Kun; Zhang, Lei; Ju, Xiao-Jie; Wang, Wei; Xie, Rui; Chu, Liang-Yin

2017-05-10

A novel reduced graphene oxide/poly(2-acrylamido-2-methylpropanesulfonic acid-co-acrylamide) (rGO/poly(AMPS-co-AAm)) nanocomposite hydrogel that possesses excellent electro-response and mechanical properties has been successfully developed. The rGO nanosheets that homogeneously dispersed in the hydrogels could provide prominent conductive platforms for promoting the ion transport inside the hydrogels to generate significant osmotic pressure between the outside and inside of such nanocomposite hydrogels. Thus, the electro-responsive rate and degree of the hydrogel for both deswelling and bending performances become rapid and remarkable. Moreover, the enhanced mechanical properties including both the tensile strength and compressive strength of rGO/poly(AMPS-co-AAm) hydrogels are improved by the hydrogen-bond interactions between the rGO nanosheets and polymer chains, which could dissipate the strain energy in the polymeric networks of the hydrogels. The proposed rGO/poly(AMPS-co-AAm) nanocomposite hydrogels with improved mechanical properties exhibit rapid, significant, and reversible electro-response, which show great potential for developing remotely controlled electro-responsive hydrogel systems, such as smart actuators and soft manipulators.

Laser-assisted advanced assembly for MEMS fabrication

NASA Astrophysics Data System (ADS)

Atanasov, Yuriy Andreev

Micro Electro-Mechanical Systems (MEMS) are currently fabricated using methods originally designed for manufacturing semiconductor devices, using minimum if any assembly at all. The inherited limitations of this approach narrow the materials that can be employed and reduce the design complexity, imposing limitations on MEMS functionality. The proposed Laser-Assisted Advanced Assembly (LA3) method solves these problems by first fabricating components followed by assembly of a MEMS device. Components are micro-machined using a laser or by photolithography followed by wet/dry etching out of any material available in a thin sheet form. A wide range of materials can be utilized, including biocompatible metals, ceramics, polymers, composites, semiconductors, and materials with special properties such as memory shape alloys, thermoelectric, ferromagnetic, piezoelectric, and more. The approach proposed allows enhancing the structural and mechanical properties of the starting materials through heat treatment, tribological coatings, surface modifications, bio-functionalization, and more, a limited, even unavailable possibility with existing methods. Components are transferred to the substrate for assembly using the thermo-mechanical Selective Laser Assisted Die Transfer (tmSLADT) mechanism for microchips assembly, already demonstrated by our team. Therefore, the mechanical and electronic part of the MEMS can be fabricated using the same equipment/method. The viability of the Laser-Assisted Advanced Assembly technique for MEMS is demonstrated by fabricating magnetic switches for embedding in a conductive carbon-fiber metamaterial for use in an Electromagnetic-Responsive Mobile Cyber-Physical System (E-RMCPS), which is expected to improve the wireless communication system efficiency within a battery-powered device.

Study on the radial vibration of a piezoelectric ceramic thin ring with an inner metal disc

NASA Astrophysics Data System (ADS)

Lin, Shuyu

2006-11-01

In this paper, a piezoelectric ceramic thin ring with an inner metal disc is studied. The radial vibrations of a metal thin disc and a piezoelectric ceramic thin ring are analysed. Their electro-mechanical equivalent circuits in radial vibration are obtained. Based on the electro-mechanical equivalent circuits and the radial boundary conditions, the composite electro-mechanical equivalent circuit of the combination of a piezoelectric ceramic thin ring and a metal disc is obtained and the resonance and anti-resonance frequency equations are derived. The relationship between the resonance frequency, the anti-resonance frequency, the effective electro-mechanical coupling coefficient and the geometrical dimensions is analysed. The resonance and anti-resonance frequencies are measured using the Agilent Precision Impedance Analyzer. It is illustrated that the measured radial resonance and anti-resonance frequencies are in good agreement with the theoretical results.

78 FR 3363 - Airworthiness Directives; the Boeing Company Airplanes

Federal Register 2010, 2011, 2012, 2013, 2014

2013-01-16

...-mechanical brake flex shaft (short flexshaft) of the thrust reverser actuation system (TRAS). This proposed... the electro-mechanical brake and center drive unit (CDU) cone brake to verify the holding torque, and... describes a functional test of the electro-mechanical brake and CDU cone brake to verify the holding torque...

Performance of MEMS Silicon Oscillator, ASFLM1, under Wide Operating Temperature Range

NASA Technical Reports Server (NTRS)

Patterson, Richard L.; Hammoud, Ahmad

2008-01-01

Over the last few years, MEMS (Micro-Electro-Mechanical Systems) resonator-based oscillators began to be offered as commercial-off-the-shelf (COTS) parts by a few companies [1-2]. These quartz-free, miniature silicon devices could compete with the traditional crystal oscillators in providing the timing (clock function) for many digital and analog electronic circuits. They provide stable output frequency, offer great tolerance to shock and vibration, and are immune to electro-static discharge [1-2]. In addition, they are encapsulated in compact lead-free packages, cover a wide frequency range (1 MHz to 125 MHz), and are specified, depending on the grade, for extended temperature operation from -40 C to +85 C. The small size of the MEMS oscillators along with their reliability and thermal stability make them candidates for use in space exploration missions. Limited data, however, exist on the performance and reliability of these devices under operation in applications where extreme temperatures or thermal cycling swings, which are typical of space missions, are encountered. This report presents the results of the work obtained on the evaluation of an ABRACON Corporation MEMS silicon oscillator chip, type ASFLM1, under extreme temperatures.

Photonic elements in smart systems for use in aerospace platforms

NASA Astrophysics Data System (ADS)

Adamovsky, Grigory; Baumbick, Robert J.; Tabib-Azar, Massood

1998-07-01

To compete globally in the next millennium, designers of new transportation vehicles will have to be innovative. Keen competition will reward innovative concepts that are developed and proven first. In order to improve reliability of aerospace platforms and reduce operating cots, new technologies must be exploited to produce autonomous systems, based on highly distributed, smart systems, which can be treated as line replaceable units. These technologies include photonics, which provide sensing and information transfer functions, and micro electro mechanical systems that will produce the actuation and, in some cases, may even provide a computing capability that resembles the hydro- mechanical control system used in older aircraft systems. The combination of these technologies will provide unique systems that will enable achieving the reliability and cost goals dictated by global market. In the article we review some of these issues and discuss a role of photonics in smart system for aerospace platforms.

MEMS for optical switching: technologies, applications, and perspectives

NASA Astrophysics Data System (ADS)

Lin, Lih-Y.; Goldstein, Evan L.

1999-09-01

Micro-electro-mechanical-systems (MEMS), due to their unique ability to integrate electrical, mechanical, and optical elements on a single chip, have recently begun to exhibit great potential for realizing optical components and subsystems in compact, lowcost form. Recently, this technology has been applied to wavelength-division-multiplexed (WDM) networks, and resulted in advances in several network elements, including switches, filters, modulators, and wavelength-add/drop multiplexers. Due largely to the exploding capacity demand arising from data traffic, the transmission capacity demanded of and available from WDM networks is anticipated to increase rapidly. For managing such networks, optical switching is of particular interest due to the fact that its complexity is essentially immune to steady advances in the per-channel bit-rate. We will review various micromachined optical-switching technologies, emphasizing studies of their reliability. We then summarizing recent progress in the free-space MEMS optical switch we have demonstrated.

MEMS for optical switching: technologies, applications, and perspectives

NASA Astrophysics Data System (ADS)

Lin, Lih-Yuan; Goldstein, Evan L.

1999-09-01

Micro-electro-mechanical-systems (MEMS), due to their unique ability to integrate electrical, mechanical, and optical elements on a single chip, have recently begun to exhibit great potential for realizing optical components and subsystems in compact, low-cost form. Recently, this technology has been applied to wavelength-division-multiplexed (WDM) networks, and resulted in advances in several network elements, including switches, filters, modulators, and wavelength-add/drop multiplexers. Due largely to the exploding capacity demand arising from data traffic, the transmission capacity demanded of and available from WDM networks is anticipated to increase rapidly. For managing such networks, optical switching is of particular interest due to the fact that its complexity is essentially immune to steady advances in the per-channel bit-rate. We will review various micromachined optical-switching technologies, emphasizing studies of their reliability. We then summarizing recent progress in the free-space MEMS optical switch we have demonstrated.

Angular dependence of Raman scattering selection rules for long-wavelength optical phonons in short-period GaAs/AlAs superlattices

DOE Office of Scientific and Technical Information (OSTI.GOV)

Volodin, V. A., E-mail: volodin@isp.nsc.ru; Sachkov, V. A.; Sinyukov, M. P.

2016-07-15

The angular dependence of Raman scattering selection rules for optical phonons in short-period (001) GaAs/AlAs superlattices is calculated and experimentally studied. Experiments are performed using a micro-Raman setup, in the scattering geometry with the wavevectors of the incident and scattered light lying in the plane of superlattices (so-called in-plane geometry). Phonon frequencies are calculated using the Born model taking the Coulomb interaction into account in the rigid-ion approximation. Raman scattering spectra are calculated in the framework of the deformation potential and electro-optical mechanisms. Calculations show an angular dependence of the selection rules for optical phonons with different directions of themore » wavevectors. Drastic differences in the selection rules are found for experimental and calculated spectra. Presumably, these differences are due to the Fröhlich mechanism in Raman scattering for short-period superlattices.« less

CNT coated thread micro-electro-mechanical system for finger proprioception sensing

NASA Astrophysics Data System (ADS)

Shafi, A. A.; Wicaksono, D. H. B.

2017-04-01

In this paper, we aim to fabricate cotton thread based sensor for proprioceptive application. Cotton threads are utilized as the structural component of flexible sensors. The thread is coated with multi-walled carbon nanotube (MWCNT) dispersion by using facile conventional dipping-drying method. The electrical characterization of the coated thread found that the resistance per meter of the coated thread decreased with increasing the number of dipping. The CNT coated thread sensor works based on piezoresistive theory in which the resistance of the coated thread changes when force is applied. This thread sensor is sewed on glove at the index finger between middle and proximal phalanx parts and the resistance change is measured upon grasping mechanism. The thread based microelectromechanical system (MEMS) enables the flexible sensor to easily fit perfectly on the finger joint and gives reliable response as proprioceptive sensing.

Diffusion Bonding of Silicon Carbide for MEMS-LDI Applications

NASA Technical Reports Server (NTRS)

Halbig, Michael C.; Singh, Mrityunjay; Shpargel, Tarah P.; Kiser, J. Douglas

2007-01-01

A robust joining approach is critically needed for a Micro-Electro-Mechanical Systems-Lean Direct Injector (MEMS-LDI) application which requires leak free joints with high temperature mechanical capability. Diffusion bonding is well suited for the MEMS-LDI application. Diffusion bonds were fabricated using titanium interlayers between silicon carbide substrates during hot pressing. The interlayers consisted of either alloyed titanium foil or physically vapor deposited (PVD) titanium coatings. Microscopy shows that well adhered, crack free diffusion bonds are formed under optimal conditions. Under less than optimal conditions, microcracks are present in the bond layer due to the formation of intermetallic phases. Electron microprobe analysis was used to identify the reaction formed phases in the diffusion bond. Various compatibility issues among the phases in the interlayer and substrate are discussed. Also, the effects of temperature, pressure, time, silicon carbide substrate type, and type of titanium interlayer and thickness on the microstructure and composition of joints are discussed.

cDPD: A new dissipative particle dynamics method for modeling electrokinetic phenomena at the mesoscale

NASA Astrophysics Data System (ADS)

Deng, Mingge; Li, Zhen; Borodin, Oleg; Karniadakis, George Em

2016-10-01

We develop a "charged" dissipative particle dynamics (cDPD) model for simulating mesoscopic electrokinetic phenomena governed by the stochastic Poisson-Nernst-Planck and the Navier-Stokes equations. Specifically, the transport equations of ionic species are incorporated into the DPD framework by introducing extra degrees of freedom and corresponding evolution equations associated with each DPD particle. Diffusion of ionic species driven by the ionic concentration gradient, electrostatic potential gradient, and thermal fluctuations is captured accurately via pairwise fluxes between DPD particles. The electrostatic potential is obtained by solving the Poisson equation on the moving DPD particles iteratively at each time step. For charged surfaces in bounded systems, an effective boundary treatment methodology is developed for imposing both the correct hydrodynamic and electrokinetics boundary conditions in cDPD simulations. To validate the proposed cDPD model and the corresponding boundary conditions, we first study the electrostatic structure in the vicinity of a charged solid surface, i.e., we perform cDPD simulations of the electrostatic double layer and show that our results are in good agreement with the well-known mean-field theoretical solutions. We also simulate the electrostatic structure and capacity densities between charged parallel plates in salt solutions with different salt concentrations. Moreover, we employ the proposed methodology to study the electro-osmotic and electro-osmotic/pressure-driven flows in a micro-channel. In the latter case, we simulate the dilute poly-electrolyte solution drifting by electro-osmotic flow in a micro-channel, hence demonstrating the flexibility and capability of this method in studying complex fluids with electrostatic interactions at the micro- and nano-scales.

Theoretical and experimental analysis of AlGaInP micro-LED array with square-circle anode

NASA Astrophysics Data System (ADS)

Tian, Chao; Wang, Weibiao; Liang, Jingqiu; Liang, Zhongzhu; Qin, Yuxin; Lv, Jinguang

2015-04-01

An array of 320 × 240 micro-light-emitting diodes (micro-LEDs) based on an AlGaInP epitaxial wafer and with a unit size of 100 µm×100 µm was designed and fabricated. The optimum width of the isolation groove between adjacent light-emitting units was determined based on a compromise between full isolation of each LED and maximization of the light emitting area, and was found to be 20 µm. The grooves were filled with a mixed Si granule-polyurethane composite medium, because this type of insulating material can reflect part of the emitted light from the sidewall to the window layer in each light-emitting unit, and could thus improve lighting output efficiency. The 10-µm-wide square-circle anode was designed to increase the light emitting area while simultaneously being simple to fabricate. The device current used was in the 0.42-1.06 mA range to guarantee internal quantum efficiency of more than 85%, with a corresponding voltage range of 2-2.3 V. The layered temperature distribution in a single unit was simulated under a drive voltage of 2.2 V, and the maximum device temperature was 341 K. The micro-opto-electro-mechanical systems (MOEMS) technology-based fabrication process, experimental images of the device and device test results are presented here.

Theoretical and experimental analysis of AlGaInP micro-LED array with square-circle anode

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tian, Chao; University of Chinese Academy of Sciences, Beijing 100049; Wang, Weibiao, E-mail: wangwbcn@163.com

An array of 320 × 240 micro-light-emitting diodes (micro-LEDs) based on an AlGaInP epitaxial wafer and with a unit size of 100 µm×100 µm was designed and fabricated. The optimum width of the isolation groove between adjacent light-emitting units was determined based on a compromise between full isolation of each LED and maximization of the light emitting area, and was found to be 20 µm. The grooves were filled with a mixed Si granule-polyurethane composite medium, because this type of insulating material can reflect part of the emitted light from the sidewall to the window layer in each light-emitting unit,more » and could thus improve lighting output efficiency. The 10-µm-wide square-circle anode was designed to increase the light emitting area while simultaneously being simple to fabricate. The device current used was in the 0.42–1.06 mA range to guarantee internal quantum efficiency of more than 85%, with a corresponding voltage range of 2–2.3 V. The layered temperature distribution in a single unit was simulated under a drive voltage of 2.2 V, and the maximum device temperature was 341 K. The micro-opto-electro-mechanical systems (MOEMS) technology-based fabrication process, experimental images of the device and device test results are presented here.« less

Laser-Excited Electronic and Thermal Elastic Vibrations in a Semiconductor Rectangular Plate

NASA Astrophysics Data System (ADS)

Todorović, D. M.; Cretin, B.; Vairac, P.; Song, Y. Q.; Rabasović, M. D.; Markushev, D. D.

2013-09-01

Photoacoustic and photothermal effects can be important as driven mechanisms for micro-(opto)-electro-mechanical structures (MOEMS). A new approach for a producing a compact, lightweight, highly sensitive detector is provided by MOEMS technology, which is based on the elastic bending of microstructure generated by absorption of modulated optical power. The electronic and thermal elastic vibrations (the electronic deformation and thermoelastic mechanisms of elastic wave generation) in a semiconductor rectangular simply supported plate (3D geometry), photogenerated by a focused and intensity-modulated laser beam, were studied. The theoretical model for the elastic displacements space and frequency distribution by using the Green function method was given. The amplitude of the elastic bending in the rectangular plate was calculated and analyzed, including the thermalization and surface and volume recombination heat sources. The theoretical results were compared with the experimental data. These investigations are important for many practical experimental situations (atomic force microscopy, thermal microscopy, thermoelastic microscopy, etc.) and sensors and actuators.

Tunable Polarization Conversion and Rotation based on a Reconfigurable Metasurface.

PubMed

Zhang, M; Zhang, W; Liu, A Q; Li, F C; Lan, C F

2017-09-21

Polarization is an important property of electromagnetic (EM) wave and different polarization manipulations are required for varied optical applications. Here we report a reconfigurable metasurface which achieves both the polarization conversion and the polarization rotation in THz regime. The metasurface is reconfigured through the micro-electro-mechanical-systems (MEMS) actuation. The cross polarization transmittance from a linear polarized incidence is experimentally tuned from 0 to 28% at 2.66 THz. In addition, the polarization rotation angle is effectively changed from -12.8° to 13.1° at 1.78 THz. The tunable bi-functional metasurface for polarization conversion and the polarization rotation can be flexibly applied in various applications such as imaging, polarization microscopy and material analysis, etc.

Electronic system for the complex measurement of a Wilberforce pendulum

NASA Astrophysics Data System (ADS)

Kos, B.; Grodzicki, M.; Wasielewski, R.

2018-05-01

The authors present a novel application of a micro-electro-mechanical measurement system to the description of basic physical phenomena in a model Wilberforce pendulum. The composition of the kit includes a tripod with a mounted spring with freely hanging bob, a module GY-521 on the MPU 6050 coupled with an Arduino Uno, which in conjunction with a PC acts as measuring set. The system allows one to observe the swing of the pendulum in real time. Obtained data stays in good agreement with both theoretical predictions and previous works. The aim of this article is to introduce the study of a Wilberforce pendulum to the canon of physical laboratory exercises due to its interesting properties and multifaceted method of measurement.

Field Programmable Gate Array (FPGA) Respiratory Monitoring System Using a Flow Microsensor and an Accelerometer

NASA Astrophysics Data System (ADS)

Mellal, Idir; Laghrouche, Mourad; Bui, Hung Tien

2017-04-01

This paper describes a non-invasive system for respiratory monitoring using a Micro Electro Mechanical Systems (MEMS) flow sensor and an IMU (Inertial Measurement Unit) accelerometer. The designed system is intended to be wearable and used in a hospital or at home to assist people with respiratory disorders. To ensure the accuracy of our system, we proposed a calibration method based on ANN (Artificial Neural Network) to compensate the temperature drift of the silicon flow sensor. The sigmoid activation functions used in the ANN model were computed with the CORDIC (COordinate Rotation DIgital Computer) algorithm. This algorithm was also used to estimate the tilt angle in body position. The design was implemented on reconfigurable platform FPGA.

Design of MOEMS adjustable optical delay line to reduce link set-up time in a tera-bit/s optical interconnection network.

PubMed

Jing, Wencai; Zhang, Yimo; Zhou, Ge

2002-07-15

A new structure for bit synchronization in a tera-bit/s optical interconnection network has been designed using micro-electro-mechanical system (MEMS) technique. Link multiplexing has been adopted to reduce data packet communication latency. To eliminate link set-up time, adjustable optical delay lines (AODLs) have been adopted to shift the phases of the distributed optical clock signals for bit synchronization. By changing the optical path distance of the optical clock signal, the phase of the clock signal can be shifted at a very high resolution. A phase-shift resolution of 0.1 ps can be easily achieved with 30-microm alternation of the optical path length in vacuum.

Improvement of thermal conductivities for silicone nanocomposite via incorporating poly(γ-methacryloxypropyltrimethoxy silane) grafted graphene fillers

NASA Astrophysics Data System (ADS)

Chen, Tian; Liu, Bo

2018-02-01

The proposed grafting polymerization of γ-methacryloxypropyltrimethoxy silane was performed to functionalize graphene, aiming to fabricate functionalized graphene/silicone with excellent thermal conductivities. The surface morphology and element content of poly(γ-methacryloxypropyltrimethoxy silane) grafted reduced graphene oxide (g-RGO) was characterized by Atomic force microscope (AFM) and X-ray photoelectron spectroscopy (XPS). The usage of g-RGO was benefit for improving the thermal conductivity of silicone (SI). The g-RGO/SI (2 wt% filler) had thermal conductivity of 1.31 W·m-1·K-1 and thermal diffusivity of 1.08 mm2·s-1 (increased by 620% compared to that of SI), which held potential for electronic packaging materials and micro-electro-mechanical systems apparatus.

Miniaturized video-rate epi-third-harmonic-generation fiber-microscope.

PubMed

Chia, Shih-Hsuan; Yu, Che-Hang; Lin, Chih-Han; Cheng, Nai-Chia; Liu, Tzu-Ming; Chan, Ming-Che; Chen, I-Hsiu; Sun, Chi-Kuang

2010-08-02

With a micro-electro-mechanical system (MEMS) mirror, we successfully developed a miniaturized epi-third-harmonic-generation (epi-THG) fiber-microscope with a video frame rate (31 Hz), which was designed for in vivo optical biopsy of human skin. With a large-mode-area (LMA) photonic crystal fiber (PCF) and a regular microscopic objective, the nonlinear distortion of the ultrafast pulses delivery could be much reduced while still achieving a 0.4 microm lateral resolution for epi-THG signals. In vivo real time virtual biopsy of the Asian skin with a video rate (31 Hz) and a sub-micron resolution was obtained. The result indicates that this miniaturized system was compact enough for the least invasive hand-held clinical use.

Review of MEMS differential scanning calorimetry for biomolecular study

NASA Astrophysics Data System (ADS)

Yu, Shifeng; Wang, Shuyu; Lu, Ming; Zuo, Lei

2017-12-01

Differential scanning calorimetry (DSC) is one of the few techniques that allow direct determination of enthalpy values for binding reactions and conformational transitions in biomolecules. It provides the thermodynamics information of the biomolecules which consists of Gibbs free energy, enthalpy and entropy in a straightforward manner that enables deep understanding of the structure function relationship in biomolecules such as the folding/unfolding of protein and DNA, and ligand bindings. This review provides an up to date overview of the applications of DSC in biomolecular study such as the bovine serum albumin denaturation study, the relationship between the melting point of lysozyme and the scanning rate. We also introduce the recent advances of the development of micro-electro-mechanic-system (MEMS) based DSCs.

Laser heating of aqueous samples on a micro-optical-electro-mechanical system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Beer, Neil Reginald; Kennedy, Ian

2013-12-17

A system of heating a sample on a microchip includes the steps of providing a microchannel flow channel in the microchip; positioning the sample within the microchannel flow channel, providing a laser that directs a laser beam onto the sample for heating the sample; providing the microchannel flow channel with a wall section that receives the laser beam and enables the laser beam to pass through wall section of the microchannel flow channel without being appreciably heated by the laser beam; and providing a carrier fluid in the microchannel flow channel that moves the sample in the microchannel flow channelmore » wherein the carrier fluid is not appreciably heated by the laser beam.« less

Electrokinetic high pressure hydraulic system

DOEpatents

Paul, Phillip H.; Rakestraw, David J.; Arnold, Don W.; Hencken, Kenneth R.; Schoeniger, Joseph S.; Neyer, David W.

2001-01-01

An electrokinetic high pressure hydraulic pump for manipulating fluids in capillary-based systems. The pump uses electro-osmotic flow to provide a high pressure hydraulic system, having no moving mechanical parts, for pumping and/or compressing fluids, for providing valve means and means for opening and closing valves, for controlling fluid flow rate, and manipulating fluid flow generally and in capillary-based systems (Microsystems), in particular. The compact nature of the inventive high pressure hydraulic pump provides the ability to construct a micro-scale or capillary-based HPLC system that fulfills the desire for small sample quantity, low solvent consumption, improved efficiency, the ability to run samples in parallel, and field portability. Control of pressure and solvent flow rate is achieved by controlling the voltage applied to an electrokinetic pump.

Electrokinetic high pressure hydraulic system

DOEpatents

Paul, Phillip H.; Rakestraw, David J.; Arnold, Don W.; Hencken, Kenneth R.; Schoeniger, Joseph S.; Neyer, David W.

2003-06-03

An electrokinetic high pressure hydraulic pump for manipulating fluids in capillary-based system. The pump uses electro-osmotic flow to provide a high pressure hydraulic system, having no moving mechanical parts, for pumping and/or compressing fluids, for providing valve means and means for opening and closing valves, for controlling fluid flow rate, and manipulating fluid flow generally and in capillary-based systems (microsystems), in particular. The compact nature of the inventive high pressure hydraulic pump provides the ability to construct a micro-scale or capillary-based HPLC system that fulfills the desire for small sample quantity, low solvent consumption, improved efficiency, the ability to run samples in parallel, and field portability. Control of pressure and solvent flow rate is achieved by controlling the voltage applied to an electrokinetic pump.

Electrospray Encapsulation of Toll-Like Receptor Agonist Resiquimod in Polymer Microparticles for the Treatment of Visceral Leishmaniasis

DTIC Science & Technology

2013-01-15

production using the methods described below. The remaining cells were analyzed for viability. To the cells still adhered to the culture plate, 180 μL of...2009, 43 (9), 902−910. (23) Jaworek, A. Micro - and nanoparticle production by electro- spraying. Powder Technol. 2007, 176 (1), 18−35. (24) Almeria, B...Jhunjhunwala, S.; Raimondi, G.; Thomson, A. W.; Little, S. R. Delivery of rapamycin to dendritic cells using degradable micro - particles. J

A Molecular Electronic Transducer based Low-Frequency Accelerometer with Electrolyte Droplet Sensing Body

NASA Astrophysics Data System (ADS)

Liang, Mengbing

"Sensor Decade" has been labeled on the first decade of the 21st century. Similar to the revolution of micro-computer in 1980s, sensor R&D developed rapidly during the past 20 years. Hard workings were mainly made to minimize the size of devices with optimal the performance. Efforts to develop the small size devices are mainly concentrated around Micro-electro-mechanical-system (MEMS) technology. MEMS accelerometers are widely published and used in consumer electronics, such as smart phones, gaming consoles, anti-shake camera and vibration detectors. This study represents liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET), in which inertial mass is not the only but also the conversion of mechanical movement to electric current signal is the main utilization of the ionic liquid. With silicon-based planar micro-fabrication, the device uses a sub-micron liter electrolyte droplet sealed in oil as the sensing body and a MET electrode arrangement which is the anode-cathode-cathode-anode (ACCA) in parallel as the read-out sensing part. In order to sensing the movement of ionic liquid, an imposed electric potential was applied between the anode and the cathode. The electrode reaction, I3-- + 2e-- ↔ 3I --, occurs around the cathode which is reverse at the anodes. Obviously, the current magnitude varies with the concentration of ionic liquid, which will be effected by the movement of liquid droplet as the inertial mass. With such structure, the promising performance of the MET device design is to achieve 10.8 V/G (G=9.81 m/s2) sensitivity at 20 Hz with the bandwidth from 1 Hz to 50 Hz, and a low noise floor of 100 microg/sqrt(Hz) at 20 Hz.

Thermally actuated resonant silicon crystal nanobalances

NASA Astrophysics Data System (ADS)

Hajjam, Arash

As the potential emerging technology for next generation integrated resonant sensors and frequency references as well as electronic filters, micro-electro-mechanical resonators have attracted a lot of attention over the past decade. As a result, a wide variety of high frequency micro/nanoscale electromechanical resonators have recently been presented. MEMS resonators, as low-cost highly integrated and ultra-sensitive mass sensors, can potentially provide new opportunities and unprecedented capabilities in the area of mass sensing. Such devices can provide orders of magnitude higher mass sensitivity and resolution compared to Film Bulk Acoustic resonators (FBAR) or the conventional quartz and Surface Acoustic Wave (SAW) resonators due to their much smaller sizes and can be batch-fabricated and utilized in highly integrated large arrays at a very low cost. In this research, comprehensive experimental studies on the performance and durability of thermally actuated micromechanical resonant sensors with frequencies up to tens of MHz have been performed. The suitability and robustness of the devices have been demonstrated for mass sensing applications related to air-borne particles and organic gases. In addition, due to the internal thermo-electro-mechanical interactions, the active resonators can turn some of the consumed electronic power back into the mechanical structure and compensate for the mechanical losses. Therefore, such resonators can provide self-sustained-oscillation without the need for any electronic circuitry. This unique property has been deployed to demonstrate a prototype self-sustained sensor for air-borne particle monitoring. I have managed to overcome one of the obstacles for MEMS resonators, which is their relatively poor temperature stability. This is a major drawback when compared with the conventional quartz crystals. A significant decrease of the large negative TCF for the resonators has been attained by doping the devices with a high concentration of phosphorous, resulting in even slightly positive TCF for some of the devices. This is also expected to improve the phase noise characteristics of oscillators implemented utilizing such frequency references by eliminating the sharp dependence to electronic noise in the resonator bias current. Finally it is well known that non-uniformities in fabrication of MEMS resonators lead to variations in their frequency. I have proposed both active (non-permanent) and permanent frequency modification to compensate for variations in frequency of the MEMS resonators.

Electro-Microfluidic Packaging

NASA Astrophysics Data System (ADS)

Benavides, G. L.; Galambos, P. C.

2002-06-01

There are many examples of electro-microfluidic products that require cost effective packaging solutions. Industry has responded to a demand for products such as drop ejectors, chemical sensors, and biological sensors. Drop ejectors have consumer applications such as ink jet printing and scientific applications such as patterning self-assembled monolayers or ejecting picoliters of expensive analytes/reagents for chemical analysis. Drop ejectors can be used to perform chemical analysis, combinatorial chemistry, drug manufacture, drug discovery, drug delivery, and DNA sequencing. Chemical and biological micro-sensors can sniff the ambient environment for traces of dangerous materials such as explosives, toxins, or pathogens. Other biological sensors can be used to improve world health by providing timely diagnostics and applying corrective measures to the human body. Electro-microfluidic packaging can easily represent over fifty percent of the product cost and, as with Integrated Circuits (IC), the industry should evolve to standard packaging solutions. Standard packaging schemes will minimize cost and bring products to market sooner.

Simulations of induced-charge electro-osmosis in microfluidic devices

NASA Astrophysics Data System (ADS)

Ben, Yuxing

2005-03-01

Theories of nonlinear electrokinetic phenomena generally assume a uniform, neutral bulk electroylte in contact with a polarizable thin double layer near a metal or dielectric surface, which acts as a "capacitor skin". Induced-charge electro-osmosis (ICEO) is the general effect of nonlinear electro-osmotic slip, when an applied electric field acts on its own induced (diffuse) double-layer charge. In most theoretical and experimental work, ICEO has been studied in very simple geometries, such as colloidal spheres and planar, periodic micro-electrode arrays. Here we use finite-element simulations to predict how more complicated geometries of polarizable surfaces and/or electrodes yield flow profiles with subtle dependence on the amplitude and frequency of the applied voltage. We also consider how the simple model equations break down, due to surface conduction, bulk diffusion, and concentration polarization, for large applied voltages (as in most experiments).

Effects of alloying and local order in AuNi contacts for Ohmic radio frequency micro electro mechanical systems switches via multi-scale simulation

NASA Astrophysics Data System (ADS)

Gaddy, Benjamin E.; Kingon, Angus I.; Irving, Douglas L.

2013-05-01

Ohmic RF-MEMS switches hold much promise for low power wireless communication, but long-term degradation currently plagues their reliable use. Failure in these devices occurs at the contact and is complicated by the fact that the same asperities that bear the mechanical load are also important to the flow of electrical current needed for signal processing. Materials selection holds the key to overcoming the barriers that prevent widespread use. Current efforts in materials selection have been based on the material's (or alloy's) ability to resist oxidation as well as its room-temperature properties, such as hardness and electrical conductivity. No ideal solution has yet been found via this route. This may be due, in part, to the fact that the in-use changes to the local environment of the asperity are not included in the selection criteria. For example, Joule heating would be expected to raise the local temperature of the asperity and impose a non-equilibrium thermal gradient in the same region expected to respond to mechanical actuation. We propose that these conditions should be considered in the selection process, as they would be expected to alter mechanical, electrical, and chemical mechanisms in the vicinity of the surface. To this end, we simulate the actuation of an Ohmic radio frequency micro electro mechanical systems switch by using a multi-scale method to model a current-carrying asperity in contact with a polycrystalline substrate. Our method couples continuum solutions of electrical and thermal transport equations to an underlying molecular dynamics simulation. We present simulations of gold-nickel asperities and substrates in order to evaluate the influence of alloying and local order on the early stages of contact actuation. The room temperature response of these materials is compared to the response of the material when a voltage is applied. Au-Ni interactions are accounted for through modification of the existing Zhou embedded atom method potential. The modified potential more accurately captures trends in high-temperature properties, including the enthalpy of mixing and melting temperatures. We simulate the loading of a contacting asperity to several substrates with varying Ni alloying concentrations and compare solid solution strengthening to a phase-separated system. Our simulations show that Ni concentration and configuration have an important effect on contact area, constriction resistance, thermal profiles, and material transfer. These differences suggest that a substrate with 15 at. % Ni featuring phase segregation has fewer early markers that experimentally have indicated long-term failure.

A novel miniature dynamic microfluidic cell culture platform using electro-osmosis diode pumping.

PubMed

Chang, Jen-Yung; Wang, Shuo; Allen, Jeffrey S; Lee, Seong Hyuk; Chang, Suk Tai; Choi, Young-Ki; Friedrich, Craig; Choi, Chang Kyoung

2014-07-01

An electro-osmosis (EOS) diode pumping platform capable of culturing cells in fluidic cellular micro-environments particularly at low volume flow rates has been developed. Diode pumps have been shown to be a viable alternative to mechanically driven pumps. Typically electrokinetic micro-pumps were limited to low-concentration solutions (≤10 mM). In our approach, surface mount diodes were embedded along the sidewalls of a microchannel to rectify externally applied alternating current into pulsed direct current power across the diodes in order to generate EOS flows. This approach has for the first time generated flows at ultra-low flow rates (from 2.0 nl/s to 12.3 nl/s) in aqueous solutions with concentrations greater than 100 mM. The range of flow was generated by changing the electric field strength applied to the diodes from 0.5 Vpp/cm to 10 Vpp/cm. Embedding an additional diode on the upper surface of the enclosed microchannel increased flow rates further. We characterized the diode pump-driven fluidics in terms of intensities and frequencies of electric inputs, pH values of solutions, and solution types. As part of this study, we found that the growth of A549 human lung cancer cells was positively affected in the microfluidic diode pumping system. Though the chemical reaction compromised the fluidic control overtime, the system could be maintained fully functional over a long time if the solution was changed every hour. In conclusion, the advantage of miniature size and ability to accurately control fluids at ultra-low volume flow rates can make this diode pumping system attractive to lab-on-a-chip applications and biomedical engineering in vitro studies.

A novel miniature dynamic microfluidic cell culture platform using electro-osmosis diode pumping

PubMed Central

Chang, Jen-Yung; Wang, Shuo; Allen, Jeffrey S.; Lee, Seong Hyuk; Chang, Suk Tai; Choi, Young-Ki; Friedrich, Craig; Choi, Chang Kyoung

2014-01-01

An electro-osmosis (EOS) diode pumping platform capable of culturing cells in fluidic cellular micro-environments particularly at low volume flow rates has been developed. Diode pumps have been shown to be a viable alternative to mechanically driven pumps. Typically electrokinetic micro-pumps were limited to low-concentration solutions (≤10 mM). In our approach, surface mount diodes were embedded along the sidewalls of a microchannel to rectify externally applied alternating current into pulsed direct current power across the diodes in order to generate EOS flows. This approach has for the first time generated flows at ultra-low flow rates (from 2.0 nl/s to 12.3 nl/s) in aqueous solutions with concentrations greater than 100 mM. The range of flow was generated by changing the electric field strength applied to the diodes from 0.5 Vpp/cm to 10 Vpp/cm. Embedding an additional diode on the upper surface of the enclosed microchannel increased flow rates further. We characterized the diode pump-driven fluidics in terms of intensities and frequencies of electric inputs, pH values of solutions, and solution types. As part of this study, we found that the growth of A549 human lung cancer cells was positively affected in the microfluidic diode pumping system. Though the chemical reaction compromised the fluidic control overtime, the system could be maintained fully functional over a long time if the solution was changed every hour. In conclusion, the advantage of miniature size and ability to accurately control fluids at ultra-low volume flow rates can make this diode pumping system attractive to lab-on-a-chip applications and biomedical engineering in vitro studies. PMID:25379101

A nano-scale mirror-like surface of Ti-6Al-4V attained by chemical mechanical polishing

NASA Astrophysics Data System (ADS)

Chenliang, Liang; Weili, Liu; Shasha, Li; Hui, Kong; Zefang, Zhang; Zhitang, Song

2016-05-01

Metal Ti and its alloys have been widely utilized in the fields of aviation, medical science, and micro-electro-mechanical systems, for its excellent specific strength, resistance to corrosion, and biological compatibility. As the application of Ti moves to the micro or nano scale, however, traditional methods of planarization have shown their short slabs. Thus, we introduce the method of chemical mechanical polishing (CMP) to provide a new way for the nano-scale planarization method of Ti alloys. We obtain a mirror-like surface, whose flatness is of nano-scale, via the CMP method. We test the basic mechanical behavior of Ti-6Al-4V (Ti64) in the CMP process, and optimize the composition of CMP slurry. Furthermore, the possible reactions that may take place in the CMP process have been studied by electrochemical methods combined with x-ray photoelectron spectroscopy (XPS). An equivalent circuit has been built to interpret the dynamic of oxidation. Finally, a model has been established to explain the synergy of chemical and mechanical effects in the CMP of Ti-6Al-4V. Project supported by the National Major Scientific and Technological Special Project during the Twelfth Five-year Plan Period of China (Grant No. 2009ZX02030-1), the National Natural Science Foundation of China (Grant No. 51205387), the Support by Science and Technology Commission of Shanghai City, China (Grant No. 11nm0500300), and the Science and Technology Commission of Shanghai City, China (Grant No. 14XD1425300).

Narrow linewidth diode laser modules for quantum optical sensor applications in the field and in space

NASA Astrophysics Data System (ADS)

Wicht, A.; Bawamia, A.; Krüger, M.; Kürbis, Ch.; Schiemangk, M.; Smol, R.; Peters, A.; Tränkle, G.

2017-02-01

We present the status of our efforts to develop very compact and robust diode laser modules specifically suited for quantum optics experiments in the field and in space. The paper describes why hybrid micro-integration and GaAs-diode laser technology is best suited to meet the needs of such applications. The electro-optical performance achieved with hybrid micro-integrated, medium linewidth, high power distributed-feedback master-oscillator-power-amplifier modules and with medium power, narrow linewidth extended cavity diode lasers emitting at 767 nm and 780 nm are briefly described and the status of space relevant stress tests and space heritage is summarized. We also describe the performance of an ECDL operating at 1070 nm. Further, a novel and versatile technology platform is introduced that allows for integration of any type of laser system or electro-optical module that can be constructed from two GaAs chips. This facilitates, for the first time, hybrid micro-integration, e.g. of extended cavity diode laser master-oscillator-poweramplifier modules, of dual-stage optical amplifiers, or of lasers with integrated, chip-based phase modulator. As an example we describe the implementation of an ECDL-MOPA designed for experiments on ultra-cold rubidium and potassium atoms on board a sounding rocket and give basic performance parameters.

High power vertical stacked and horizontal arrayed diode laser bar development based on insulation micro-channel cooling (IMCC) and hard solder bonding technology

NASA Astrophysics Data System (ADS)

Wang, Boxue; Jia, Yangtao; Zhang, Haoyu; Jia, Shiyin; Liu, Jindou; Wang, Weifeng; Liu, Xingsheng

2018-02-01

An insulation micro-channel cooling (IMCC) has been developed for packaging high power bar-based vertical stack and horizontal array diode lasers, which eliminates many issues caused in its congener packaged by commercial copper formed micro-channel cooler(MCC), such as coefficient of thermal expansion (CTE) mismatch between cooler and diode laser bar, high coolant quality requirement (DI water) and channel corrosion and electro-corrosion induced by DI water if the DI-water quality is not well maintained The IMCC cooler separates water flow route and electrical route, which allows tap-water as coolant without electro-corrosion and therefore prolongs cooler lifetime dramatically and escalated the reliability of these diode lasers. The thickness of ceramic and copper in an IMCC cooler is well designed to minimize the CTE mismatch between laser bar and cooler, consequently, a very low "SMILE" of the laser bar can be achieved for small fast axis divergence after collimation. In additional, gold-tin hard solder bonding technology was also developed to minimize the risk of solder electromigration at high current density and thermal fatigue under hard-pulse operation mode. Testing results of IMCC packaged diode lasers are presented in this report.

Simultaneous measurement of temperature, stress, and electric field in GaN HEMTs with micro-Raman spectroscopy.

PubMed

Bagnall, Kevin R; Moore, Elizabeth A; Badescu, Stefan C; Zhang, Lenan; Wang, Evelyn N

2017-11-01

As semiconductor devices based on silicon reach their intrinsic material limits, compound semiconductors, such as gallium nitride (GaN), are gaining increasing interest for high performance, solid-state transistor applications. Unfortunately, higher voltage, current, and/or power levels in GaN high electron mobility transistors (HEMTs) often result in elevated device temperatures, degraded performance, and shorter lifetimes. Although micro-Raman spectroscopy has become one of the most popular techniques for measuring localized temperature rise in GaN HEMTs for reliability assessment, decoupling the effects of temperature, mechanical stress, and electric field on the optical phonon frequencies measured by micro-Raman spectroscopy is challenging. In this work, we demonstrate the simultaneous measurement of temperature rise, inverse piezoelectric stress, thermoelastic stress, and vertical electric field via micro-Raman spectroscopy from the shifts of the E 2 (high), A 1 longitudinal optical (LO), and E 2 (low) optical phonon frequencies in wurtzite GaN. We also validate experimentally that the pinched OFF state as the unpowered reference accurately measures the temperature rise by removing the effect of the vertical electric field on the Raman spectrum and that the vertical electric field is approximately the same whether the channel is open or closed. Our experimental results are in good quantitative agreement with a 3D electro-thermo-mechanical model of the HEMT we tested and indicate that the GaN buffer acts as a semi-insulating, p-type material due to the presence of deep acceptors in the lower half of the bandgap. This implementation of micro-Raman spectroscopy offers an exciting opportunity to simultaneously probe thermal, mechanical, and electrical phenomena in semiconductor devices under bias, providing unique insight into the complex physics that describes device behavior and reliability. Although GaN HEMTs have been specifically used in this study to demonstrate its viability, this technique is applicable to any solid-state material with a suitable Raman response and will likely enable new measurement capabilities in a wide variety of scientific and engineering applications.

Simultaneous measurement of temperature, stress, and electric field in GaN HEMTs with micro-Raman spectroscopy

NASA Astrophysics Data System (ADS)

Bagnall, Kevin R.; Moore, Elizabeth A.; Badescu, Stefan C.; Zhang, Lenan; Wang, Evelyn N.

2017-11-01

As semiconductor devices based on silicon reach their intrinsic material limits, compound semiconductors, such as gallium nitride (GaN), are gaining increasing interest for high performance, solid-state transistor applications. Unfortunately, higher voltage, current, and/or power levels in GaN high electron mobility transistors (HEMTs) often result in elevated device temperatures, degraded performance, and shorter lifetimes. Although micro-Raman spectroscopy has become one of the most popular techniques for measuring localized temperature rise in GaN HEMTs for reliability assessment, decoupling the effects of temperature, mechanical stress, and electric field on the optical phonon frequencies measured by micro-Raman spectroscopy is challenging. In this work, we demonstrate the simultaneous measurement of temperature rise, inverse piezoelectric stress, thermoelastic stress, and vertical electric field via micro-Raman spectroscopy from the shifts of the E2 (high), A1 longitudinal optical (LO), and E2 (low) optical phonon frequencies in wurtzite GaN. We also validate experimentally that the pinched OFF state as the unpowered reference accurately measures the temperature rise by removing the effect of the vertical electric field on the Raman spectrum and that the vertical electric field is approximately the same whether the channel is open or closed. Our experimental results are in good quantitative agreement with a 3D electro-thermo-mechanical model of the HEMT we tested and indicate that the GaN buffer acts as a semi-insulating, p-type material due to the presence of deep acceptors in the lower half of the bandgap. This implementation of micro-Raman spectroscopy offers an exciting opportunity to simultaneously probe thermal, mechanical, and electrical phenomena in semiconductor devices under bias, providing unique insight into the complex physics that describes device behavior and reliability. Although GaN HEMTs have been specifically used in this study to demonstrate its viability, this technique is applicable to any solid-state material with a suitable Raman response and will likely enable new measurement capabilities in a wide variety of scientific and engineering applications.

Lithographic microfabrication of biocompatible polymers for tissue engineering and lab-on-a-chip applications

NASA Astrophysics Data System (ADS)

Balciunas, Evaldas; Jonusauskas, Linas; Valuckas, Vytautas; Baltriukiene, Daiva; Bukelskiene, Virginija; Gadonas, Roaldas; Malinauskas, Mangirdas

2012-06-01

In this work, a combination of Direct Laser Writing (DLW), PoliDiMethylSiloxane (PDMS) soft lithography and UV lithography was used to create cm- scale microstructured polymer scaolds for cell culture experiments out of dierent biocompatible materials: novel hybrid organic-inorganic SZ2080, PDMS elastomer, biodegradable PEG- DA-258 and SU-8. Rabbit muscle-derived stem cells were seeded on the fabricated dierent periodicity scaolds to evaluate if the relief surface had any eect on cell proliferation. An array of microlenses was fabricated using DLW out of SZ2080 and replicated in PDMS and PEG-DA-258, showing good potential applicability of the used techniques in many other elds like micro- and nano- uidics, photonics, and MicroElectroMechanical Systems (MEMS). The synergetic employment of three dierent fabrication techniques allowed to produce desired objects with low cost, high throughput and precision as well as use materials that are dicult to process by other means (PDMS and PEG-DA-258). DLW is a relatively slow fabrication method, since the object has to be written point-by-point. By applying PDMS soft lithography, we were enabled to replicate laser-fabricated scaolds for stem cell growth and micro-optical elements for lab-on-a-chip applications with high speed, low cost and good reproducible quality.

Elimination of initial stress-induced curvature in a micromachined bi-material composite-layered cantilever

NASA Astrophysics Data System (ADS)

Liu, Ruiwen; Jiao, Binbin; Kong, Yanmei; Li, Zhigang; Shang, Haiping; Lu, Dike; Gao, Chaoqun; Chen, Dapeng

2013-09-01

Micro-devices with a bi-material-cantilever (BMC) commonly suffer initial curvature due to the mismatch of residual stress. Traditional corrective methods to reduce the residual stress mismatch generally involve the development of different material deposition recipes. In this paper, a new method for reducing residual stress mismatch in a BMC is proposed based on various previously developed deposition recipes. An initial material film is deposited using two or more developed deposition recipes. This first film is designed to introduce a stepped stress gradient, which is then balanced by overlapping a second material film on the first and using appropriate deposition recipes to form a nearly stress-balanced structure. A theoretical model is proposed based on both the moment balance principle and total equal strain at the interface of two adjacent layers. Experimental results and analytical models suggest that the proposed method is effective in producing multi-layer micro cantilevers that display balanced residual stresses. The method provides a generic solution to the problem of mismatched initial stresses which universally exists in micro-electro-mechanical systems (MEMS) devices based on a BMC. Moreover, the method can be incorporated into a MEMS design automation package for efficient design of various multiple material layer devices from MEMS material library and developed deposition recipes.

Development of the micro pixel chamber based on MEMS technology

NASA Astrophysics Data System (ADS)

Takemura, T.; Takada, A.; Kishimoto, T.; Komura, S.; Kubo, H.; Matsuoka, Y.; Miuchi, K.; Miyamoto, S.; Mizumoto, T.; Mizumura, Y.; Motomura, T.; Nakamasu, Y.; Nakamura, K.; Oda, M.; Ohta, K.; Parker, J. D.; Sawano, T.; Sonoda, S.; Tanimori, T.; Tomono, D.; Yoshikawa, K.

2018-02-01

Micro pixel chambers (μ-PIC) are gaseous two-dimensional imaging detectors originally manufactured using printed circuit board (PCB) technology. They are used in MeV gamma-ray astronomy, medicalimaging, neutron imaging, the search for dark matter, and dose monitoring. The position resolution of the present μ-PIC is approximately 120 μm (RMS), however some applications require a fine position resolution of less than 100 μm. To this end, we have started to develop a μ-PIC based on micro electro mechanical system (MEMS) technology, which provides better manufacturing accuracy than PCB technology. Our simulation predicted the gains of MEMS μ-PICs to be twice those of PCB μ-PICs at the same anode voltage. We manufactured two MEMS μ-PICs and tested them to study their behavior. In these experiments, we successfully operated the fabricatedMEMS μ-PICs and we achieved a maximum gain of approximately 7×103 and collected their energy spectra under irradiation of X-rays from 55Fe. However, the measured gains of the MEMS μ-PICs were less than half of the values predicted in the simulations. We postulated that the gains of the MEMS μ-PICs are diminished by the effect of the silicon used as a semiconducting substrate.

Effects of surface roughening on the mass transport and mechanical properties of ionic polymer-metal composite

NASA Astrophysics Data System (ADS)

Chang, Longfei; Asaka, Kinji; Zhu, Zicai; Wang, Yanjie; Chen, Hualing; Li, Dichen

2014-06-01

Ionic Polymer-Metal Composite (IPMC) has been well-documented of being a promising functional material in extensive applications. In its most popular and traditional manufacturing technique, roughening is a key process to ensure a satisfying performance. In this paper, based on a lately established multi-physical model, the effect of roughening process on the inner mass transportation and the electro-active output of IPMC were investigated. In the model, the electro-chemical field was monitored by Poisson equation and a properly simplified Nernst-Planck equation set, while the mechanical field was evaluated on the basis of volume strain effect. Furthermore, with Ramo-Shockley theorem, the out-circuit current and accumulated charge on the electrode were bridged with the inner cation distribution. Besides, nominal current and charge density as well as the curvature of the deformation were evaluated to characterize the performance of IPMC. The simulation was implemented by Finite Element Method with Comsol Multi-physics, based on two groups of geometrical models, those with various rough interface and those with different thickness. The results of how the roughening impact influences on the performance of IPMC were discussed progressively in three aspects, steady-state distribution of local potential and mass concentration, current response and charge accumulation, as well as the curvature of deformation. Detailed explanations for the performance improvement resulted from surface roughening were provided from the micro-distribution point of view, which can be further explored for the process optimization of IPMC.

Use of the electro-separation method for improvement of the utility value of winter rapeseeds

NASA Astrophysics Data System (ADS)

Kovalyshyn, S. J.; Shvets, O. P.; Grundas, S.; Tys, J.

2013-12-01

The paper presents the results of a study of the use of electro-separation methods for improvement of the utility value of 5 winter rapeseed cultivars. The process of electro-separation of rapeseed was conducted on a prototype apparatus built at the Laboratory of Application of Electro-technologies in Agriculture, Lviv National Agriculture University. The process facilitated separation of damaged, low quality seeds from the sowing material. The initial mean level of mechanically damaged seeds in the winter rapeseed cultivars studied varied within the range of 15.8-20.1%. Verification of the amount of seeds with mechanical damage was performed on X-ray images of seeds acquired by means of a digital X-ray apparatus. In the course of analysis of the X-ray images, it was noted that the mean level of mechanical damage to the seeds after the electro-separation was in the range of 2.1-3.8%. The application of the method of separation of rapeseeds in the corona discharge field yielded a significant reduction of the level of seeds with mechanical damage. The application of the method in practice may effectively contribute to improvement of the utility value of sowing material or seed material for production of edible oil.

Transport of Multivalent Electrolyte Mixtures in Micro- and Nanochannels

DTIC Science & Technology

2013-11-08

equations for this process are the unsteady Navier-Stokes equations along with continuity and the Poisson- Nernst -Planck system for the electro- static part...about five times the Debye screening length D (the 1/e lengthscale for the potential from the solution of the linearized Poisson- Boltzmann equation

The Effect of Electrokinetic Controlled Wettability on Externally Measured Pressures for a Micro-Fluidic Channel

NASA Astrophysics Data System (ADS)

Zhou, X.; Nolte, D. D.; Pyrak-Nolte, L. J.

2017-12-01

The hysteretic relationship between capillary pressure (Pc) on saturation (S) has been shown to be a projection of a higher-dimensional surface that depends on interfacial area per volume (IAV) as the additional state variable. Most studies that validate the capillary-pressure-saturation-IAV relationship are performed on 2D micro-models or cores where scanning is performed in pressure and not in saturation. We have developed an EWOD technique (electro-wetting on dielectric) to internally manipulate fluid saturation to determine the effect on externally measured pressures. Applying electric fields to electrolytic fluids changes the contact angle among the fluids and the solid. For a parallel-plate electro-wetting set-up, the pressure difference is given by gsl (cosq'EW - cosqEW )/d', where d' is the aperture, qEQ and q'EW are the contact angles before and after the application of voltage, V, and gsl is the interfacial tension between the solid and liquid phases. This pressure difference enables direct control over internal fluid distributions. The contact angle reverts to the original value when V = 0. A sealed micro-model with Electro-Wetting on Dielectric (EWOD) electrodes was fabricated using a PDMS wedge-shaped channel with an entrance width of 1 mm and an exit width of 2 mm. The channel length was 2 mm, and had a depth of 0.9 mm. The PDMS channel was attached to an aluminum plate that served as the ground electrode. An ITO slide coated with PDMS formed the high voltage electrode and was used to seal the micro-model. X-ray Micro-CT scans showed that the contact angle between electrodes changes from from 110˚ (non-wetting) to 70˚ (wetting) for an applied voltage of 318 V AC. By applying voltage to the wedge-shaped micromodel, with the inlet and the outlet opened to the atmosphere, the externally measured capillary pressure remained constant even though the fluid-air interface moved and the saturation increased. For a closed system, the externally measured change in capillary pressure was 30 Pa and the saturation in the channel increased. EWOD provides method to assess the contributions of wettability to the fundamental physics of immiscible fluids in analog porous media. Acknowledgment: This research was supported by the National Science Foundation (1314663-EAR).

Stress Analysis of SiC MEMS Using Raman Spectroscopy

NASA Astrophysics Data System (ADS)

Ness, Stanley J.; Marciniak, M. A.; Lott, J. A.; Starman, L. A.; Busbee, J. D.; Melzak, J. M.

2003-03-01

During the fabrication of Micro-Electro-Mechanical Systems (MEMS), residual stress is often induced in the thin films that are deposited to create these systems. These stresses can cause the device to fail due to buckling, curling, or fracture. Industry is looking for ways to characterize the stress during the deposition of thin films in order to reduce or eliminate device failure. Micro-Raman spectroscopy has been successfully used to characterize poly-Si MEMS devices made with the MUMPS® process. Raman spectroscopy was selected because it is nondestructive, fast and has the potential for in situ stress monitoring. This research attempts to use Raman spectroscopy to analyze the stress in SiC MEMS made with the MUSiC® process. Raman spectroscopy is performed on 1-2-micron-thick SiC thin films deposited on silicon, silicon nitride, and silicon oxide substrates. The most common poly-type of SiC found in thin film MEMS made with the MUSiC® process is 3C-SiC. Research also includes baseline spectra of 6H, 4H, and 15R poly-types of bulk SiC.

Arrays of EAP micro-actuators for single-cell stretching applications

NASA Astrophysics Data System (ADS)

Akbari, S.; Niklaus, M.; Shea, H.

2010-04-01

Mechanical stimuli are critical for the development and maintenance of most tissues such as muscles, cartilage, bones and blood vessels. The commercially available cell culture systems replicating the in vivo environment are typically based on simple membrane cell-stretching equipment, which can only measure the average response of large colonies of cells over areas of greater than one cm2. We present here the conceptual design and the complete fabrication process of an array of 128 Electro-Active Polymer (EAP) micro-actuators which are uni-axially stretched and hence used to impose unidirectional strain on single cells, make it feasible to do experiments on the cytomechanics of individual cells. The Finite Element Method is employed to study the effect of different design parameters on achievable strain, leading to the optimized design. Compliant gold electrodes are deposited by low-energy ion implantation on both sides of a PDMS membrane, as this technique allows making electrodes that support large strain with minimal stiffening of the elastomer. The membrane is bonded to a rigid support, leading to an array of 100×100 μm2 EAP actuators.

Photo-driven nanoactuators based on carbon nanocoils and vanadium dioxide bimorphs.

PubMed

Ma, He; Zhang, Xinping; Cui, Ruixue; Liu, Feifei; Wang, Meng; Huang, Cuiying; Hou, Jiwei; Wang, Guang; Wei, Yang; Jiang, Kaili; Pan, Lujun; Liu, Kai

2018-06-06

Photo-driven actuators are highly desirable in various smart systems owing to the advantages of wireless control and possible actuation by solar energy. Miniaturization of photo-driven actuators is particularly essential in micro-robotics and micro-/nano-electro-mechanical systems. However, it remains a great challenge to build up nano-scale photo-driven actuators with competitive performance in amplitude, response speed, and lifetime. In this work, we developed photo-driven nanoactuators based on bimorph structures of vanadium dioxides (VO2) and carbon nanocoils (CNCs). Activated by the huge structural phase transition of VO2, the photo-driven VO2/CNC nanoactuators deliver a giant amplitude, a fast response up to 9400 Hz, and a long lifetime more than 10 000 000 actuation cycles. Both experimental and simulation results show that the helical structure of CNCs enables a low photo-driven threshold of VO2/CNC nanoactuators, which provides an effective method to construct photo-driven nanoactuators with low power consumption. Our photo-driven VO2/CNC nanoactuators would find potential applications in nano-scale electrical/optical switches and other smart devices.

Micro-/nanoscale multi-field coupling in nonlinear photonic devices

NASA Astrophysics Data System (ADS)

Yang, Qing; Wang, Yubo; Tang, Mingwei; Xu, Pengfei; Xu, Yingke; Liu, Xu

2017-08-01

The coupling of mechanics/electronics/photonics may improve the performance of nanophotonic devices not only in the linear region but also in the nonlinear region. This review letter mainly presents the recent advances on multi-field coupling in nonlinear photonic devices. The nonlinear piezoelectric effect and piezo-phototronic effects in quantum wells and fibers show that large second-order nonlinear susceptibilities can be achieved, and second harmonic generation and electro-optic modulation can be enhanced and modulated. Strain engineering can tune the lattice structures and induce second order susceptibilities in central symmetry semiconductors. By combining the absorption-based photoacoustic effect and intensity-dependent photobleaching effect, subdiffraction imaging can be achieved. This review will also discuss possible future applications of these novel effects and the perspective of their research. The review can help us develop a deeper knowledge of the substance of photon-electron-phonon interaction in a micro-/nano- system. Moreover, it can benefit the design of nonlinear optical sensors and imaging devices with a faster response rate, higher efficiency, more sensitivity and higher spatial resolution which could be applied in environmental detection, bio-sensors, medical imaging and so on.

Finite element based contact analysis of radio frequency MEMs switch membrane surfaces

NASA Astrophysics Data System (ADS)

Liu, Jin-Ya; Chalivendra, Vijaya; Huang, Wenzhen

2017-10-01

Finite element simulations were performed to determine the contact behavior of radio frequency (RF) micro-electro-mechanical (MEM) switch contact surfaces under monotonic and cyclic loading conditions. Atomic force microscopy (AFM) was used to capture the topography of RF-MEM switch membranes and later they were analyzed for multi-scale regular as well as fractal structures. Frictionless, non-adhesive contact 3D finite element analysis was carried out at different length scales to investigate the contact behavior of the regular-fractal surface using an elasto-plastic material model. Dominant micro-scale regular patterns were found to significantly change the contact behavior. Contact areas mainly cluster around the regular pattern. The contribution from the fractal structure is not significant. Under cyclic loading conditions, plastic deformation in the 1st loading/unloading cycle smooth the surface. The subsequent repetitive loading/unloading cycles undergo elastic contact without changing the morphology of the contacting surfaces. The work is expected to shed light on the quality of the switch surface contact as well as the optimum design of RF MEM switch surfaces.

Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip

PubMed Central

Dai, Zhengfei; Xu, Lei; Duan, Guotao; Li, Tie; Zhang, Hongwen; Li, Yue; Wang, Yi; Wang, Yuelin; Cai, Weiping

2013-01-01

The chemiresistive thin film gas sensors with fast response, high sensitivity, low power consumption and mass-produced potency, have been expected for practical application. It requires both sensitive materials, especially exquisite nanomaterials, and efficient substrate chip for heating and electrical addressing. However, it is challenging to achieve repeatable microstructures across the films and low power consumption of substrate chip. Here we presented a new sensor structure via the fusion of metal-oxide nanoporous films and micro-electro-mechanical systems (MEMS)-based sensing chip. An interdigital-electrodes (IDEs) and microheater integrated MEMS structure is designed and employed as substrate chip to in-situ fabricate colloidal monolayer template-induced metal-oxide (egg. SnO2) nanoporous sensing films. This fused sensor demonstrates mW-level low power, ultrafast response (~1 s), and parts-per-billion lever detection for ethanol gas. Due to the controllable template strategy and mass-production potential, such micro/nano fused high-performance gas sensors will be next-generation key miniaturized/integrated devices for advanced practical applications. PMID:23591580

Micro-particle transporting system using galvanotactically stimulated apo-symbiotic cells of Paramecium bursaria.

PubMed

Furukawa, Shunsuke; Karaki, Chiaki; Kawano, Tomonori

2009-01-01

It is well known that Paramecium species including green paramecia (Paramecium bursaria) migrate towards the anode when exposed to an electric field in a medium. This type of a cellular movement is known as galvanotaxis. Our previous study revealed that an electric stimulus given to P bursaria is converted to a galvanotactic cellular movement by involvement of T-type calcium channel on the plasma membrane [Aonuma et al. (2007), Z. Naturforsch. 62c, 93-102]. This phenomenon has attracted the attention of bioengineers in the fields of biorobotics or micro-robotics in order to develop electrically controllable micromachineries. Here, we demonstrate the galvanotactic controls of the cellular migration of P bursaria in capillary tubes (diameter, 1-2 mm; length, 30-240 mm). Since the Paramecium cells take up particles of various sizes, we attempted to use the electrically stimulated cells of P bursaria as the vehicle for transportation of micro-particles in the capillary system. By using apo-symbiotic cells of P bursaria obtained after forced removal of symbiotic algae, the uptake of the particles could be maximized and visualized. Then, electrically controlled transportations of particle-filled apo-symbiotic P bursaria cells were manifested. The particles transported by electrically controlled cells (varying in size from nm to /m levels) included re-introduced green algae, fluorescence-labeled polystyrene beads, magnetic microspheres, emerald green fluorescent protein (EmGFP)-labeled cells of E. coli, Indian ink, and crystals of zeolite (hydrated aluminosilicate minerals with a micro-porous structure) and some metal oxides. Since the above demonstrations were successful, we concluded that P bursaria has a potential to be employed as one of the micro-biorobotic devices used in BioMEMS (biological micro-electro-mechanical systems).

The better way to determine the validity, reliability, objectivity and accuracy of measuring devices.

PubMed

Pazira, Parvin; Rostami Haji-Abadi, Mahdi; Zolaktaf, Vahid; Sabahi, Mohammadfarzan; Pazira, Toomaj

2016-06-08

In relation to statistical analysis, studies to determine the validity, reliability, objectivity and precision of new measuring devices are usually incomplete, due in part to using only correlation coefficient and ignoring the data dispersion. The aim of this study was to demonstrate the best way to determine the validity, reliability, objectivity and accuracy of an electro-inclinometer or other measuring devices. Another purpose of this study is to answer the question of whether reliability and objectivity represent accuracy of measuring devices. The validity of an electro-inclinometer was examined by mechanical and geometric methods. The objectivity and reliability of the device was assessed by calculating Cronbach's alpha for repeated measurements by three raters and by measurements on the same person by mechanical goniometer and the electro-inclinometer. Measurements were performed on "hip flexion with the extended knee" and "shoulder abduction with the extended elbow." The raters measured every angle three times within an interval of two hours. The three-way ANOVA was used to determine accuracy. The results of mechanical and geometric analysis showed that validity of the electro-inclinometer was 1.00 and level of error was less than one degree. Objectivity and reliability of electro-inclinometer was 0.999, while objectivity of mechanical goniometer was in the range of 0.802 to 0.966 and the reliability was 0.760 to 0.961. For hip flexion, the difference between raters in joints angle measurement by electro-inclinometer and mechanical goniometer was 1.74 and 16.33 degree (P<0.05), respectively. The differences for shoulder abduction measurement by electro-inclinometer and goniometer were 0.35 and 4.40 degree (P<0.05). Although both the objectivity and reliability are acceptable, the results showed that measurement error was very high in the mechanical goniometer. Therefore, it can be concluded that objectivity and reliability alone cannot determine the accuracy of a device and it is preferable to use other statistical methods to compare and evaluate the accuracy of these two devices.

Storage reliability analysis summary report. Volume 2: Electro mechanical devices

NASA Astrophysics Data System (ADS)

Smith, H. B., Jr.; Krulac, I. L.

1982-09-01

This document summarizes storage reliability data collected by the US Army Missile Command on electro-mechanical devices over a period of several years. Sources of data are detailed, major failure modes and mechanisms are listed and discussed. Non-operational failure rate prediction methodology is given, and conclusions and recommendations for enhancing the storage reliability of devices are drawn from the analysis of collected data.

Shape Memory Actuation and Release Devices.

DTIC Science & Technology

1996-10-01

shelf devices such as pyrotechnics, gas-discharge systems, paraffin wax actuators, and other electro-mechanical devices may not be able to meet...shelf devices such as pyrotechnics, gas-discharge systems, paraffin wax actuators, and other electro-mechanical devices may not be able to meet future...shard mounts. They do have wide utility as pin-pullers and single point release devices for a variety of spacecraft appendages. Parrafin based mechanisms

Electro-mechanical control of an on-chip optical beam splitter containing an embedded quantum emitter

NASA Astrophysics Data System (ADS)

Bishop, Z. K.; Foster, A. P.; Royall, B.; Bentham, C.; Clarke, E.; Skolnick, M. S.; Wilson, L. R.

2018-05-01

We demonstrate electro-mechanical control of an on-chip GaAs optical beam splitter containing a quantum dot single-photon source. The beam splitter consists of two nanobeam waveguides, which form a directional coupler (DC). The splitting ratio of the DC is controlled by varying the out-of-plane separation of the two waveguides using electro-mechanical actuation. We reversibly tune the beam splitter between an initial state, with emission into both output arms, and a final state with photons emitted into a single output arm. The device represents a compact and scalable tuning approach for use in III-V semiconductor integrated quantum optical circuits.

The rectenna design on contact lens for wireless powering of the active intraocular pressure monitoring system.

PubMed

Cheng, H W; Jeng, B M; Chen, C Y; Huang, H Y; Chiou, J C; Luo, C H

2013-01-01

This paper proposed a wireless power harvesting system with micro-electro-mechanical-systems (MEMS) fabrication for noninvasive intraocular pressure (IOP) measurement on soft contact lens substructure. The power harvesting IC consists of a loop antenna, an impedance matching network and a rectifier. The proposed IC has been designed and fabricated by CMOS 0.18 um process that operates at the ISM band of 5.8 GHz. The antenna and the power harvesting IC would be bonded together by using flip chip bonding technologies without extra wire interference. The circuit utilized an impedance transformation circuit to boost the input RF signal that improves the circuit performance. The proposed design achieves an RF-to-DC conversion efficiency of 35% at 5.8 GHz.

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.

PubMed

Pang, Cheng; Bae, Hyungdae; Gupta, Ashwani; Bryden, Kenneth; Yu, Miao

2013-09-23

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

A Hazardous Gas Detection System for Aerospace and Commercial Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L. - Y.; Makel, D. B.; Liu, C. C.; Wu, Q. H.; Knight, D.

1998-01-01

The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrogation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.

A Hazardous Gas Detection System for Aerospace and Commercial Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Makel, D. B.; Liu, C. C.; Wu, Q. H.; Knight, D.

1998-01-01

The detection of explosive conditions in aerospace propulsion applications is important for safety and economic reasons. Microfabricated hydrogen, oxygen, and hydrocarbon sensors as well as the accompanying hardware and software are being, developed for a range of aerospace safety applications. The development of these sensors is being done using MEMS (Micro ElectroMechanical Systems) based technology and SiC-based semiconductor technology. The hardware and software allows control and interrocation of each sensor head and reduces accompanying cabling through multiplexing. These systems are being, applied on the X-33 and on an upcoming STS-95 Shuttle mission. A number of commercial applications are also being pursued. It is concluded that this MEMS-based technology has significant potential to reduce costs and increase safety in a variety of aerospace applications.

Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror.

PubMed

Tan, Jiazheng; Sun, Weijie; Yeow, John T W

2017-05-26

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regulation problem theoretically. In this paper, based on the internal model principle, the output regulation problem is solved by designing a robust controller that is able to force the micromirror to track the command signal accurately. The proposed controller relies little on the accuracy of the model. Further, the proposed controller is implemented, and its effectiveness is examined by experiments. The experimental results demonstrate that the performance of the proposed controller is satisfying.

Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror

PubMed Central

Tan, Jiazheng; Sun, Weijie; Yeow, John T. W.

2017-01-01

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regulation problem theoretically. In this paper, based on the internal model principle, the output regulation problem is solved by designing a robust controller that is able to force the micromirror to track the command signal accurately. The proposed controller relies little on the accuracy of the model. Further, the proposed controller is implemented, and its effectiveness is examined by experiments. The experimental results demonstrate that the performance of the proposed controller is satisfying. PMID:28587105

Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging.

PubMed

Strathman, Matthew; Liu, Yunbo; Li, Xingde; Lin, Lih Y

2013-10-07

We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias.

Adaptive optics in multiphoton microscopy: comparison of two, three and four photon fluorescence

PubMed Central

Sinefeld, David; Paudel, Hari P.; Ouzounov, Dimitre G.; Bifano, Thomas G.; Xu, Chris

2015-01-01

We demonstrate adaptive optics system based on nonlinear feedback from 3- and 4-photon fluorescence. The system is based on femtosecond pulses created by soliton self-frequency shift of a 1550-nm fiber-based femtosecond laser together with micro-electro-mechanical system (MEMS) phase spatial light modulator (SLM). We perturb the 1020-segment SLM using an orthogonal Walsh sequence basis set with a modified version of three-point phase shifting interferometry. We show the improvement after aberrations correction in 3-photon signal from fluorescent beads. In addition, we compare the improvement obtained in the same adaptive optical system for 2-, 3- and 4-photon fluorescence using dye pool. We show that signal improvement resulting from aberration correction grows exponentially as a function of the order of nonlinearity. PMID:26698772

Application of SPM interferometry in MEMS vibration measurement

NASA Astrophysics Data System (ADS)

Tang, Chaowei; He, Guotian; Xu, Changbiao; Zhao, Lijuan; Hu, Jun

2007-12-01

The resonant frequency measurement of cantilever has an important position in MEMS(Micro Electro Mechanical Systems) research. Meanwhile the SPM interferometry is a high-precision optical measurement technique, which can be used in physical quantity measurement of vibration, displacement, surface profile. Hence, in this paper we propose to apply SPM(SPM) interferometry in measuring the vibration of MEMS cantilever and in the experiment the vibration of MEMS cantilever was driven by light source. Then this kind of vibration was measured in nm precision. Finally the relational characteristics of MEMS cantilever vibration under optical excitation can be gotten and the measurement principle is analyzed. This method eliminates the influence on the measuring precision caused by external interference and light intensity change through feedback control loop. Experiment results prove that this measurement method has a good effect.

Performance Thresholds for Application of MEMS Inertial Sensors in Space

NASA Technical Reports Server (NTRS)

Smit, Geoffrey N.

1995-01-01

We review types of inertial sensors available and current usage of inertial sensors in space and the performance requirements for these applications. We then assess the performance available from micro-electro-mechanical systems (MEMS) devices, both in the near and far term. Opportunities for the application of these devices are identified. A key point is that although the performance available from MEMS inertial sensors is significantly lower than that achieved by existing macroscopic devices (at least in the near term), the low cost, low size, and power of the MEMS devices opens up a number of applications. In particular, we show that there are substantial benefits to using MEMS devices to provide vibration, and for some missions, attitude sensing. In addition, augmentation for global positioning system (GPS) navigation systems holds much promise.

Multi-function optical characterization and inspection of MEMS components using stroboscopic coherence scanning interferometry

NASA Astrophysics Data System (ADS)

Tapilouw, Abraham Mario; Chen, Liang-Chia; Xuan-Loc, Nguyen; Chen, Jin-Liang

2014-08-01

A Micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive industries. However, effective inspection systems are also needed to ensure the functional reliability of MEMS. This study developed a stroboscopic coherence scanning Interferometry (SCSI) technique for measuring key characteristics typically used as criteria in MEMS inspections. Surface profiles of MEMS both static and dynamic conditions were measured by means of coherence scanning Interferometry (CSI). Resonant frequencies of vibrating MEMS were measured by deformation of interferogram fringes for out-of-plane vibration and by image correlation for in-plane vibration. The measurement bandwidth of the developed system can be tuned up to three megahertz or higher for both in-plane and out-of-plane measurement of MEMS.

The Scientific Papers of James Prescott Joule 2 Volume Set

NASA Astrophysics Data System (ADS)

Prescott Joule, James

2011-03-01

Volume 1: Description of an electro-magnetic engine; Description of an electro-magnetic engine, with experiments; On the use of electro-magnets made of iron wire for the electro-magnetic engine; Investigations in magnetism and electro-magnetism; Investigations in magnetism and electro-magnetism; Description of an electro-magnetic engine; On electro-magnetic forces; On electro-magnetic forces; On electro-magnetic forces; Description of a new electro-magnet; On a new class of magnetic forces; On voltaic apparatus; On the production of heat by voltaic electricity; On the heat evolved by metallic conductors of electricity, and in the cells of a battery during electrolysis; On the electric origin of the heat of combustion; On the electrical origin of chemical heat; On Sir G. C. Haughton's experiments; On the heat evolved during the electrolysis of water; On the calorific effects of magneto-electricity, and on the mechanical value of heat; On the intermittent character of the voltaic current in certain cases of electrolysis; and on the intensities of various voltaic arrangements; On the changes of temperature produced by the rarefaction and condensation of air; On specific heat; On a new method for ascertaining the specific heat of bodies; Note on the employment of electrical currents for ascertaining the specific heat of bodies; On the mechanical equivalent of heat; On the existence of an equivalent relation between heat and the ordinary forms of mechanical power; On the heat disengaged in chemical combinations; On the effects of magnetism upon the dimensions of iron and steel bars; On matter, living force, and heat; On the mechanical equivalent of heat, as determined from the heat evolved by the function of fluids; On the theoretical velocity of sound; Expériences sur l'identité entre le calorique et la force méchanique. Détermination de l'équivalent par la chaleur dégagée pendant la friction du mercure; On shooting-stars; On the mechanical equivalent of heat, and on the constitution of elastic fluids; Some remarks on heat and the constitution of elastic fluids; On the mechanical equivalent of heat; On a remarkable appearance of lightning; On some amalgams; On the air-engine; Account of experiments with a powerful electro-magnet; On the economical production of mechanical effect from chemical forces; An account of some experiments with a large electro-magnet; Introductory research on the induction of magnetism by electric currents; On the fusion of metals by voltaic electricity; Note on Dalton's determination of the expansion of air by heat; On the utilization of the sewage of London and other large towns; Notice of experiments on the heat developed by friction in air; On the intensity of light during the recent solar eclipse; On an improved galvanometer; On the thermo-electricity of ferruginous metals, and on the thermal effects of stretching solid bodies; On the thermal effects of longitudinal compression of solids, with an investigation on the alterations of temperature accompanying changes of pressure in fluids; On some thermo-dynamic properties of solids; On the thermal effects of compressing fluids; On a method of testing the strength of steam-boilers; Experiments on the total heat of steam; Experiments on the passage of air through pipes and apertures in thin plates; On some amalgams; On the probable cause of electric storms; On the surface-condensation of steam; Notice of a compressing air-pump; Note on a mirage at Douglas; On a sensitive barometer; On a sensitive thermometer; Note on the meteor of February 6th, 1818; On a method of hardening steel wires for magnetic needles; On an instrument for showing rapid changes in magnetic declination; Determination of the dynamical equivalent of heat from the thermal effects of electric currents; Observations on the alteration of the freezing-point in thermometers; On a new

Compact self-aligning assemblies with refractive microlens arrays made by contactless embossing

NASA Astrophysics Data System (ADS)

Schulze, Jens; Ehrfeld, Wolfgang; Mueller, Holger; Picard, Antoni

1998-04-01

The hybrid integration of microlenses and arrays of microlenses in micro-optical systems is simplified using contactless embossing of microlenses (CEM) in combination with LIGA microfabrication. CEM is anew fabrication technique for the production of precise refractive microlens arrays. A high precision matrix of holes made by LIGA technique is used as a compression molding tool to form the microlenses. The tool is pressed onto a thermoplastic sample which is heated close to the glass transformation temperature of the material. The material bulges into the openings of the molding tool due to the applied pressure and forms lens-like spherical structures. The name refers to the fact that the surface of the microlens does not get in contact with the compression molding tool during the shaping process and optical quality of the surface is maintained. Microlenses and arrays of microlenses with lens diameters from 30 micrometers up to 700 micrometers and numerical aperture values of up to 0.25 have been fabricated in different materials. Cost-effectiveness in the production process, excellent optical performance and the feature of easy replication are the main advantages of this technique. The most promising feature of this method is the possibility to obtain self- aligned assemblies then can be further integrated into a micro-optical bench setup. The CEM fabrication method in combination with LIGA microfabrication considerably enhances the hybrid integration in micro-optical devices which results in a more cost-effective production of compact micro-opto-electro-mechanical systems.

Separation of breast cancer cells from peripherally circulating blood using antibodies fixed in microchannels

NASA Astrophysics Data System (ADS)

Feng, Juan; Soper, Steven A.; McCarley, Robin L.; Murphy, Michael C.

2004-07-01

Bio-Micro Electro Mechanical System (Bio-MEMS) technology was applied to the problem of early breast cancer detection and diagnosis. A micro-device is being developed to identify and specifically collect tumor cells of low abundance (1 tumor cell among 107 normal blood cells) from circulating whole blood. By immobilizing anti-EpCAM (Epithelial Cell Adhesion Molecule) antibodies on polymer micro-channel walls by chemically modifying the surface of the PMMA, breast cancer cells from the MCF-7 cell line, which over-express EpCAM, were selected from a sample volume by the strong binding affinity between the antibody and antigen. To validate the capture of the breast cancer cells, three fluorochrome markers, each identified by a separate color, were used to reliably identify the cancer cells. The cancer cells were defined by DAPI+ (blue), CD45- and the FITC-cell membrane linker+ (green). White blood cells, which may interfere in the detection of the cancer cells, were identified by DAPI+ (blue), CD45+ (red), and the FITC-cell membrane linker+ (green). EpCAM/anti-EpCAM binding models from the literature were used to estimate an optimal velocity, 2mm/sec, for maximizing the number of cells binding and the critical binding force. At higher velocities, shear forces (> 0.48 dyne) will break existing bonds and prevent the formation of new ones. This detection micro-device can be assembled with other lab-on-a-chip components for follow-up gene and protein analysis.

Large displacement spring-like electro-mechanical thermal actuators with insulator constraint beams

NASA Astrophysics Data System (ADS)

Luo, J. K.; Fu, Y. Q.; Flewitt, A. J.; Spearing, S. M.; Fleck, N. A.; Milne, W. I.

2005-07-01

A number of in-plane spring-like micro-electro-thermal-actuators with large displacements were proposed. The devices take the advantage of the large difference in the thermal expansion coefficients between the conductive arms and the insulator clamping beams. The constraint beams in one type (the spring) of these devices are horizontally positioned to restrict the expansion of the active arms in the x-direction, and to produce a displacement in the y-direction only. In other two types of actuators (the deflector and the contractor), the constraint beams are positioned parallel to the active arms. When the constraint beams are on the inside of the active arms, the actuator produces an outward deflection in the y-direction. When they are on the outside of the active arms, the actuator produces an inward contraction. Analytical model and finite element analysis were used to simulate the performances. It showed that at a constant temperature, analytical model is sufficient to predict the displacement of these devices. The displacements are all proportional to the temperature and the number of the chevron sections. A two-mask process is under development to fabricate these devices, using Si3N4 as the insulator beams, and electroplated Ni as the conductive beams.

Assessment of Operation of EMK21 MEMS Silicon Oscillator Over Wide Temperature Range

NASA Technical Reports Server (NTRS)

Patterson, Richard L.; Hammoud, Ahmad

2009-01-01

Electronic control systems, data-acquisition instrumentation, and microprocessors require accurate timing signals for proper operation. Traditionally, ceramic resonators and crystal oscillators provided this clock function for the majority of these systems. Over the last few years, MEMS (Micro-Electro-Mechanical Systems) resonator-based oscillators began to surface as commercial-off-the-shelf (COTS) parts by a few companies. These quartz-free, miniature silicon devices could easily replace the traditional crystal oscillators in providing the timing/clock function for many digital and analog circuits. They are reported to provide stable output frequency, offer great tolerance to shock and vibration, and are immune to electro-static discharge [ 1-2]. In addition, they are encapsulated in compact lead-free packages and cover a wide frequency range (1 MHz to 125 MHz). The small size of the MEMS oscillators along with their thermal stability make them ideal candidates for use in space exploration missions. Limited data, however, exist on the performance and reliability of these devices under operation in applications where extreme temperatures or thermal cycling swings, which are typical of space missions, are encountered. This report presents the results of the work obtained on the evaluation of an Ecliptek Corporation MEMS silicon oscillator chip under extreme temperatures.

COMPUTATIONAL CHALLENGES IN BUILDING MULTI-SCALE AND MULTI-PHYSICS MODELS OF CARDIAC ELECTRO-MECHANICS

PubMed Central

Plank, G; Prassl, AJ; Augustin, C

2014-01-01

Despite the evident multiphysics nature of the heart – it is an electrically controlled mechanical pump – most modeling studies considered electrophysiology and mechanics in isolation. In no small part, this is due to the formidable modeling challenges involved in building strongly coupled anatomically accurate and biophyically detailed multi-scale multi-physics models of cardiac electro-mechanics. Among the main challenges are the selection of model components and their adjustments to achieve integration into a consistent organ-scale model, dealing with technical difficulties such as the exchange of data between electro-physiological and mechanical model, particularly when using different spatio-temporal grids for discretization, and, finally, the implementation of advanced numerical techniques to deal with the substantial computational. In this study we report on progress made in developing a novel modeling framework suited to tackle these challenges. PMID:24043050

Nano-electro-mechanical pump: Giant pumping of water in carbon nanotubes

PubMed Central

Farimani, Amir Barati; Heiranian, Mohammad; Aluru, Narayana R.

2016-01-01

A fully controllable nano-electro-mechanical device that can pump fluids at nanoscale is proposed. Using molecular dynamics simulations, we show that an applied electric field to an ion@C60 inside a water-filled carbon nanotube can pump water with excellent efficiency. The key physical mechanism governing the fluid pumping is the conversion of electrical energy into hydrodynamic flow with efficiencies as high as 64%. Our results show that water can be compressed up to 7% higher than its bulk value by applying electric fields. High flux of water (up to 13,000 molecules/ns) is obtained by the electro-mechanical, piston-cylinder-like moving mechanism of the ion@C60 in the CNT. This large flux results from the piston-like mechanism, compressibility of water (increase in density of water due to molecular ordering), orienting dipole along the electric field and efficient electrical to mechanical energy conversion. Our findings can pave the way towards efficient energy conversion, pumping of fluids at nanoscale, and drug delivery. PMID:27193507

Nano-electro-mechanical pump: Giant pumping of water in carbon nanotubes

NASA Astrophysics Data System (ADS)

Farimani, Amir Barati; Heiranian, Mohammad; Aluru, Narayana R.

2016-05-01

A fully controllable nano-electro-mechanical device that can pump fluids at nanoscale is proposed. Using molecular dynamics simulations, we show that an applied electric field to an ion@C60 inside a water-filled carbon nanotube can pump water with excellent efficiency. The key physical mechanism governing the fluid pumping is the conversion of electrical energy into hydrodynamic flow with efficiencies as high as 64%. Our results show that water can be compressed up to 7% higher than its bulk value by applying electric fields. High flux of water (up to 13,000 molecules/ns) is obtained by the electro-mechanical, piston-cylinder-like moving mechanism of the ion@C60 in the CNT. This large flux results from the piston-like mechanism, compressibility of water (increase in density of water due to molecular ordering), orienting dipole along the electric field and efficient electrical to mechanical energy conversion. Our findings can pave the way towards efficient energy conversion, pumping of fluids at nanoscale, and drug delivery.

Nano-electro-mechanical pump: Giant pumping of water in carbon nanotubes.

PubMed

Farimani, Amir Barati; Heiranian, Mohammad; Aluru, Narayana R

2016-05-19

A fully controllable nano-electro-mechanical device that can pump fluids at nanoscale is proposed. Using molecular dynamics simulations, we show that an applied electric field to an ion@C60 inside a water-filled carbon nanotube can pump water with excellent efficiency. The key physical mechanism governing the fluid pumping is the conversion of electrical energy into hydrodynamic flow with efficiencies as high as 64%. Our results show that water can be compressed up to 7% higher than its bulk value by applying electric fields. High flux of water (up to 13,000 molecules/ns) is obtained by the electro-mechanical, piston-cylinder-like moving mechanism of the ion@C60 in the CNT. This large flux results from the piston-like mechanism, compressibility of water (increase in density of water due to molecular ordering), orienting dipole along the electric field and efficient electrical to mechanical energy conversion. Our findings can pave the way towards efficient energy conversion, pumping of fluids at nanoscale, and drug delivery.

High Bandwidth Optical Links for Micro-Satellite Support

NASA Technical Reports Server (NTRS)

Chao, Tien-Hsin (Inventor); Wilson, Keith E. (Inventor); Coste, Keith (Inventor)

2016-01-01

A method, systems, apparatus and device enable high bandwidth satellite communications. An onboard tracking detector, installed in a low-earth orbit satellite, detects a position of an incoming optical beam received/transmitted from a first ground station of one or more ground stations. Tracker electronics determine orientation information of the incoming optical beam based on the position. Control electronics receive the orientation information from the tracker electronics, and control a waveguide drive electronics. The waveguide drive electronics control a voltage that is provided to an electro-optic waveguide beam steering device. The electro-optic waveguide beam steering device steers an outgoing optical beam to one of the one or more ground stations based on the voltage.

A SUGGESTED CURRICULUM GUIDE FOR ELECTRO-MECHANICAL TECHNOLOGY ORIENTED SPECIFICALLY TO THE COMPUTER AND BUSINESS MACHINE FIELDS. INTERIM REPORT.

ERIC Educational Resources Information Center

LESCARBEAU, ROLAND F.; AND OTHERS

A SUGGESTED POST-SECONDARY CURRICULUM GUIDE FOR ELECTRO-MECHANICAL TECHNOLOGY ORIENTED SPECIFICALLY TO THE COMPUTER AND BUSINESS MACHINE FIELDS WAS DEVELOPED BY A GROUP OF COOPERATING INSTITUTIONS, NOW INCORPORATED AS TECHNICAL EDUCATION CONSORTIUM, INCORPORATED. SPECIFIC NEEDS OF THE COMPUTER AND BUSINESS MACHINE INDUSTRY WERE DETERMINED FROM…

Revision of Electro-Mechanical Drafting Program to Include CAD/D (Computer-Aided Drafting/Design). Final Report.

ERIC Educational Resources Information Center

Snyder, Nancy V.

North Seattle Community College decided to integrate computer-aided design/drafting (CAD/D) into its Electro-Mechanical Drafting Program. This choice necessitated a redefinition of the program through new curriculum and course development. To initiate the project, a new industrial advisory council was formed. Major electronic and recruiting firms…

Application of electro acoustics for dewatering pharmaceutical sludge

DOE Office of Scientific and Technical Information (OSTI.GOV)

Golla, P.S.; Johnson, H.W.

1992-02-01

Application of electro acoustic principles for dewatering has been developed by Battelle Institute. The Department of Energy, Battelle Institute, and Ashbrook-Simon-Hartley, have jointly developed an Electro Acoustic Dewatering press (EAD press). The EAD press applies a combination of mechanical pressure, electrical current and ultrasonics. This press is utilized after conventional dewatering devices and can remove up to 50% water from filtered sludge cake at a fraction of the cost incurred in existing thermal drying devices. The dominant mechanism of sludge dewatering by EAD press is electro-osmosis due to the application of a direct current field. Electro-osmosis is caused by anmore » electrical double layer of oppositely charged ions formed at the solid liquid interface, which is characterized by zeta potential. The ultrasonic fields help electro-osmosis by consolidation of the filter cake and by release of inaccessible liquid. The EAD press has been tested successfully on a variety of materials including apple pomace, corn gluten, sewage sludge, and coal fines. A three week long full scale trial was conducted successfully at a pharmaceutical industry to determine the application of this technology for dewatering waste activated sludge.« less

Recent highlights in electro-driven separations- selected applications of alkylthiol gold nanoparticles in capillary electrophoresis and capillary electro-chromatography.

PubMed

Guihen, Elizabeth

2017-09-01

To date, alkylthiol gold nanoparticles (AuNPs) have been widely used in electro-chromatographic separation techniques as a viable alternative to traditional stationary phases. This is mainly due to their stability, chemical inertness, ease of functionality, increased phase ratio, ability to form self-assembled monolayers. They also yield versatile stationary phases with highly specific targeted functionalities. At the nanoscale region, the chemical and physical properties of a molecule display different attributes to that of the parent molecules or material, hence these features can be harnessed in electro-driven chromatographic separations. Application areas illustrating the use of AuNPs in separation science continue to grow and expand to cover many different kinds of analysis. The last decade has witnessed a successful trend in miniaturisation of chemical separation systems toward the micro and nanoscale ranges. Nanoparticle-based stationary phases fit well with performing chemical separations on microfluidic and capillary platforms. In this review the theory of the use of alkylthiol gold nanoparticles in electro-chromatographic driven separation methods will be discussed. This will be followed by details of recent and selected applications showing alkylthiol gold nanoparticles in capillary electrophoretic and open-tubular electro-chromatographic separations. This review will focus solely on alkylthiol based gold nanoparticles, therefore other kinds of chemical moieties bonded to gold nanoparticles are outside the scope of this review. Finally the future outlook of this exciting technology will be outlined in some detail in the final section. © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Design of a Novel Electro-hydraulic Drive Downhole Tractor

NASA Astrophysics Data System (ADS)

Fang, Delei; Shang, Jianzhong; Yang, Junhong; Wang, Zhuo; Wu, Wei

2018-02-01

In order to improve the traction ability and the work efficiency of downhole tractor in oil field, a novel electro-hydraulic drive downhole tractor was designed. The tractor’s supporting mechanism and moving mechanism were analyzed based on the tractor mechanical structure. Through the introduction of hydraulic system, the hydraulic drive mechanism and the implementation process were researched. Based on software, analysis of tractor hydraulic drive characteristic and movement performance were simulated, which provide theoretical basis for the development of tractor prototype.

Development of Testing Methodologies for the Mechanical Properties of MEMS

NASA Technical Reports Server (NTRS)

Ekwaro-Osire, Stephen

2003-01-01

This effort is to investigate and design testing strategies to determine the mechanical properties of MicroElectroMechanical Systems (MEMS) as well as investigate the development of a MEMS Probabilistic Design Methodology (PDM). One item of potential interest is the design of a test for the Weibull size effect in pressure membranes. The Weibull size effect is a consequence of a stochastic strength response predicted from the Weibull distribution. Confirming that MEMS strength is controlled by the Weibull distribution will enable the development of a probabilistic design methodology for MEMS - similar to the GRC developed CARES/Life program for bulk ceramics. However, the primary area of investigation will most likely be analysis and modeling of material interfaces for strength as well as developing a strategy to handle stress singularities at sharp corners, filets, and material interfaces. This will be a continuation of the previous years work. The ultimate objective of this effort is to further develop and verify the ability of the Ceramics Analysis and Reliability Evaluation of Structures Life (CARES/Life) code to predict the time-dependent reliability of MEMS structures subjected to multiple transient loads.

Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples

NASA Astrophysics Data System (ADS)

Abada, S.; Salvi, L.; Courson, R.; Daran, E.; Reig, B.; Doucet, J. B.; Camps, T.; Bardinal, V.

2017-05-01

A method called ‘soft thermal printing’ (STP) was developed to ensure the optimal transfer of 50 µm-thick dry epoxy resist films (DF-1050) on small-sized samples. The aim was the uniform fabrication of high aspect ratio polymer-based MOEMS (micro-optical-electrical-mechanical system) on small and/or fragile samples, such as GaAs. The printing conditions were optimized, and the resulting thickness uniformity profiles were compared to those obtained via lamination and SU-8 standard spin-coating. Under the best conditions tested, STP and lamination produced similar results, with a maximum deviation to the central thickness of 3% along the sample surface, compared to greater than 40% for SU-8 spin-coating. Both methods were successfully applied to the collective fabrication of DF1050-based MOEMS designed for the dynamic focusing of VCSELs (vertical-cavity surface-emitting lasers). Similar, efficient electro-thermo-mechanical behaviour was obtained in both cases.

Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

PubMed Central

Phan, Hoang-Phuong; Dinh, Toan; Kozeki, Takahiro; Qamar, Afzaal; Namazu, Takahiro; Dimitrijev, Sima; Nguyen, Nam-Trung; Dao, Dzung Viet

2016-01-01

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an in situ measurement method. The experimental results show that the highly doped p-type 3C-SiC possesses a relatively stable gauge factor of approximately 25 to 28 at temperatures varying from 300 K to 573 K. The in situ method proposed in this study also demonstrated that, the combination of the piezoresistive and thermoresistive effects can increase the gauge factor of p-type 3C-SiC to approximately 20% at 573 K. The increase in gauge factor based on the combination of these phenomena could enhance the sensitivity of SiC based MEMS mechanical sensors. PMID:27349378

Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

NASA Astrophysics Data System (ADS)

Phan, Hoang-Phuong; Dinh, Toan; Kozeki, Takahiro; Qamar, Afzaal; Namazu, Takahiro; Dimitrijev, Sima; Nguyen, Nam-Trung; Dao, Dzung Viet

2016-06-01

Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an in situ measurement method. The experimental results show that the highly doped p-type 3C-SiC possesses a relatively stable gauge factor of approximately 25 to 28 at temperatures varying from 300 K to 573 K. The in situ method proposed in this study also demonstrated that, the combination of the piezoresistive and thermoresistive effects can increase the gauge factor of p-type 3C-SiC to approximately 20% at 573 K. The increase in gauge factor based on the combination of these phenomena could enhance the sensitivity of SiC based MEMS mechanical sensors.

Dynamic metasurface lens based on MEMS technology

NASA Astrophysics Data System (ADS)

Roy, Tapashree; Zhang, Shuyan; Jung, Il Woong; Troccoli, Mariano; Capasso, Federico; Lopez, Daniel

2018-02-01

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

Electro-mechanical coupling of semiconductor film grown on stainless steel by oxidation

NASA Astrophysics Data System (ADS)

Lin, M. C.; Wang, G.; Guo, L. Q.; Qiao, L. J.; Volinsky, Alex A.

2013-09-01

Electro-mechanical coupling phenomenon in oxidation film on stainless steel has been discovered by using current-sensing atomic force microscopy, along with the I-V curves measurements. The oxidation films exhibit either ohmic, n-type, or p-type semiconductor properties, according to the obtained I-V curves. This technique allows characterizing oxidation films with high spatial resolution. Semiconductor properties of oxidation films must be considered as additional stress corrosion cracking mechanisms.

Conductive reduced graphene oxide/MnO2 carbonized cotton fabrics with enhanced electro -chemical, -heating, and -mechanical properties

NASA Astrophysics Data System (ADS)

Tian, Mingwei; Du, Minzhi; Qu, Lijun; Zhang, Kun; Li, Hongliang; Zhu, Shifeng; Liu, Dongdong

2016-09-01

Versatile and ductile conductive carbonized cotton fabrics decorated with reduced graphene oxide (rGO)/manganese dioxide (MnO2) are prepared in this paper. In order to endow multifunction to cotton fabric, graphene oxide (GO) is deposited on cotton fibers by simple dip-coating route. MnO2 nanoparticles are assembled on the surface of cotton fabric through in-situ chemical solution deposition. MnO2/GO@cotton fabrics are carbonized to achieve conductive fabric (MnO2/rGO@C). The morphologies and structures of obtained fabrics are characterized by SEM, XRD, ICP and element analysis, and their electro-properties including electro-chemical, electro-heating and electro-mechanical properties are evaluated. The MnO2/rGO@C yields remarkable specific capacitance of 329.4 mA h/g at the current density of 100 mA/g, which is more than 40% higher than that of the control carbonized cotton fabric (231 mA h/g). Regarding electro-heating properties, the temperature of MnO2/rGO@C fabric could be monotonically increased to the steady-state maximum temperatures (ΔTmax) of 36 °C within 5 min under the applied voltage 15 V while the ΔTmax = 17 °C of the control case. In addition, MnO2/rGO@C exhibits repeatable electro-mechanical properties and its normalized resistance (R-R0)/R0 could reach 0.78 at a constant strain (curvature = 0.6 cm-1). The MnO2/rGO@C fabric is versatile, scalable, and adaptable to a wide variety of smart textiles applications.

Infrared thermographic diagnostic aid to aircraft maintenance

NASA Astrophysics Data System (ADS)

Delo, Michael; Delo, Steve

2007-04-01

Thermographic data can be used as a supplement to aircraft maintenance operations in both back shop and flight line situations. Aircraft systems such as electrical, propulsion, environmental, pitot static and hydraulic/pneumatic fluid, can be inspected using a thermal infrared (IR) imager. Aircraft systems utilize electro-hydraulic, electro-mechanical, and electro-pneumatic mechanisms, which, if accessible, can be diagnosed for faults using infrared technology. Since thermographs are images of heat, rather than light, the measurement principle is based on the fact that any physical object (radiating energy at infrared wavelengths within the IR portion of the electro-magnetic spectrum), can be imaged with infrared imaging equipment. All aircraft systems being tested with infrared are required to be energized for troubleshooting, so that valuable baseline data from fully operational aircraft can be collected, archived and referenced for future comparisons.

Modeling methods of MEMS micro-speaker with electrostatic working principle

NASA Astrophysics Data System (ADS)

Tumpold, D.; Kaltenbacher, M.; Glacer, C.; Nawaz, M.; Dehé, A.

2013-05-01

The market for mobile devices like tablets, laptops or mobile phones is increasing rapidly. Device housings get thinner and energy efficiency is more and more important. Micro-Electro-Mechanical-System (MEMS) loudspeakers, fabricated in complementary metal oxide semiconductor (CMOS) compatible technology merge energy efficient driving technology with cost economical fabrication processes. In most cases, the fabrication of such devices within the design process is a lengthy and costly task. Therefore, the need for computer modeling tools capable of precisely simulating the multi-field interactions is increasing. The accurate modeling of such MEMS devices results in a system of coupled partial differential equations (PDEs) describing the interaction between the electric, mechanical and acoustic field. For the efficient and accurate solution we apply the Finite Element (FE) method. Thereby, we fully take the nonlinear effects into account: electrostatic force, charged moving body (loaded membrane) in an electric field, geometric nonlinearities and mechanical contact during the snap-in case between loaded membrane and stator. To efficiently handle the coupling between the mechanical and acoustic fields, we apply Mortar FE techniques, which allow different grid sizes along the coupling interface. Furthermore, we present a recently developed PML (Perfectly Matched Layer) technique, which allows limiting the acoustic computational domain even in the near field without getting spurious reflections. For computations towards the acoustic far field we us a Kirchhoff Helmholtz integral (e.g, to compute the directivity pattern). We will present simulations of a MEMS speaker system based on a single sided driving mechanism as well as an outlook on MEMS speakers using double stator systems (pull-pull-system), and discuss their efficiency (SPL) and quality (THD) towards the generated acoustic sound.

A methodology for identification and control of electro-mechanical actuators

PubMed Central

Tutunji, Tarek A.; Saleem, Ashraf

2015-01-01

Mechatronic systems are fully-integrated engineering systems that are composed of mechanical, electronic, and computer control sub-systems. These integrated systems use electro-mechanical actuators to cause the required motion. Therefore, the design of appropriate controllers for these actuators are an essential step in mechatronic system design. In this paper, a three-stage methodology for real-time identification and control of electro-mechanical actuator plants is presented, tested, and validated. First, identification models are constructed from experimental data to approximate the plants’ response. Second, the identified model is used in a simulation environment for the purpose of designing a suitable controller. Finally, the designed controller is applied and tested on the real plant through Hardware-in-the-Loop (HIL) environment. The described three-stage methodology provides the following practical contributions: • Establishes an easy-to-follow methodology for controller design of electro-mechanical actuators. • Combines off-line and on-line controller design for practical performance. • Modifies the HIL concept by using physical plants with computer control (rather than virtual plants with physical controllers). Simulated and experimental results for two case studies, induction motor and vehicle drive system, are presented in order to validate the proposed methodology. These results showed that electromechanical actuators can be identified and controlled using an easy-to-duplicate and flexible procedure. PMID:26150992

A methodology for identification and control of electro-mechanical actuators.

PubMed

Tutunji, Tarek A; Saleem, Ashraf

2015-01-01

Mechatronic systems are fully-integrated engineering systems that are composed of mechanical, electronic, and computer control sub-systems. These integrated systems use electro-mechanical actuators to cause the required motion. Therefore, the design of appropriate controllers for these actuators are an essential step in mechatronic system design. In this paper, a three-stage methodology for real-time identification and control of electro-mechanical actuator plants is presented, tested, and validated. First, identification models are constructed from experimental data to approximate the plants' response. Second, the identified model is used in a simulation environment for the purpose of designing a suitable controller. Finally, the designed controller is applied and tested on the real plant through Hardware-in-the-Loop (HIL) environment. The described three-stage methodology provides the following practical contributions: •Establishes an easy-to-follow methodology for controller design of electro-mechanical actuators.•Combines off-line and on-line controller design for practical performance.•Modifies the HIL concept by using physical plants with computer control (rather than virtual plants with physical controllers). Simulated and experimental results for two case studies, induction motor and vehicle drive system, are presented in order to validate the proposed methodology. These results showed that electromechanical actuators can be identified and controlled using an easy-to-duplicate and flexible procedure.

Advancing MEMS Technology Usage through the MUMPS (Multi-User MEMS Processes) Program

NASA Technical Reports Server (NTRS)

Koester, D. A.; Markus, K. W.; Dhuler, V.; Mahadevan, R.; Cowen, A.

1995-01-01

In order to help provide access to advanced micro-electro-mechanical systems (MEMS) technologies and lower the barriers for both industry and academia, the Microelectronic Center of North Carolina (MCNC) and ARPA have developed a program which provides users with access to both MEMS processes and advanced electronic integration techniques. The four distinct aspects of this program, the multi-user MEMS processes (MUMP's), the consolidated micro-mechanical element library, smart MEMS, and the MEMS technology network are described in this paper. MUMP's is an ARPA-supported program created to provide inexpensive access to MEMS technology in a multi-user environment. It is both a proof-of-concept and educational tool that aids in the development of MEMS in the domestic community. MUMP's technologies currently include a 3-layer poly-silicon surface micromachining process and LIGA (lithography, electroforming, and injection molding) processes that provide reasonable design flexibility within set guidelines. The consolidated micromechanical element library (CaMEL) is a library of active and passive MEMS structures that can be downloaded by the MEMS community via the internet. Smart MEMS is the development of advanced electronics integration techniques for MEMS through the application of flip chip technology. The MEMS technology network (TechNet) is a menu of standard substrates and MEMS fabrication processes that can be purchased and combined to create unique process flows. TechNet provides the MEMS community greater flexibility and enhanced technology accessibility.

Research Technology

NASA Image and Video Library

2001-08-01

The electro-mechanical actuator, a new electronics technology, is an electronic system that provides the force needed to move valves that control the flow of propellant to the engine. It is proving to be advantageous for the main propulsion system plarned for a second generation reusable launch vehicle. Hydraulic actuators have been used successfully in rocket propulsion systems. However, they can leak when high pressure is exerted on such a fluid-filled hydraulic system. Also, hydraulic systems require significant maintenance and support equipment. The electro-mechanical actuator is proving to be low maintenance and the system weighs less than a hydraulic system. The electronic controller is a separate unit powering the actuator. Each actuator has its own control box. If a problem is detected, it can be replaced by simply removing one defective unit. The hydraulic systems must sustain significant hydraulic pressures in a rocket engine regardless of demand. The electro-mechanical actuator utilizes power only when needed. A goal of the Second Generation Reusable Launch Vehicle Program is to substantially improve safety and reliability while reducing the high cost of space travel. The electro-mechanical actuator was developed by the Propulsion Projects Office of the Second Generation Reusable Launch Vehicle Program at the Marshall Space Flight Center.

A graphene-based non-volatile memory

NASA Astrophysics Data System (ADS)

Loisel, Loïc.; Maurice, Ange; Lebental, Bérengère; Vezzoli, Stefano; Cojocaru, Costel-Sorin; Tay, Beng Kang

2015-09-01

We report on the development and characterization of a simple two-terminal non-volatile graphene switch. After an initial electroforming step during which Joule heating leads to the formation of a nano-gap impeding the current flow, the devices can be switched reversibly between two well-separated resistance states. To do so, either voltage sweeps or pulses can be used, with the condition that VSET < VRESET , where SET is the process decreasing the resistance and RESET the process increasing the resistance. We achieve reversible switching on more than 100 cycles with resistance ratio values of 104. This approach of graphene memory is competitive as compared to other graphene approaches such as redox of graphene oxide, or electro-mechanical switches with suspended graphene. We suggest a switching model based on a planar electro-mechanical switch, whereby electrostatic, elastic and friction forces are competing to switch devices ON and OFF, and the stability in the ON state is achieved by the formation of covalent bonds between the two stretched sides of the graphene, hence bridging the nano-gap. Developing a planar electro-mechanical switch enables to obtain the advantages of electro-mechanical switches while avoiding most of their drawbacks.

The Economics of van der Waals Force Engineering

NASA Astrophysics Data System (ADS)

Pinto, Fabrizio

2008-01-01

As micro-electro-mechanical system (MEMS) fabrication continues on an ever-decreasing scale, new technological challenges must be successfully negotiated if Moore's Law is to be an even approximately valid model of the future of device miniaturization. Among the most significant obstacles is the existence of strong surface forces related to quantum mechanical van der Waals interatomic interactions, which rapidly diverge as the distance between any two neutral boundaries decreases. The van der Waals force is a contributing factor in several device failures and limitations, including, for instance, stiction and oscillator non-linearities. In the last decade, however, it has been conclusively shown that van der Waals forces are not just a MEMS limitation but can be engineered in both magnitude and sign so as to enable classes of proprietary inventions which either deliver novel capabilities or improve upon existing ones. The evolution of van der Waals force research from an almost exclusively theoretical field in quantum-electro-dynamics to an enabling nanotechnology discipline represents a useful example of the ongoing paradigm shift from government-centered to private-capital funded R&D in cutting-edge physics leading to potentially profitable products. In this paper, we discuss the reasons van der Waals force engineering may lead to the creation of thriving markets both in the short and medium terms by highlighting technical challenges that can be competitively addressed by this novel approach. We also discuss some notable obstacles to the cultural transformation of the academic research community required for the emergence of a functional van der Waals force engineering industry worldwide.

The electrical conductance growth of a metallic granular packing

NASA Astrophysics Data System (ADS)

Jakšić, Zorica M.; Cvetković, Milica; Šćepanović, Julija R.; Lončarević, Ivana; Budinski-Petković, Ljuba; Vrhovac, Slobodan B.

2017-06-01

We report on measurements of the electrical conductivity on a two-dimensional packing of metallic disks when a stable current of 1 mA flows through the system. At low applied currents, the conductance σ is found to increase by a pattern σ( t) = σ ∞ - Δσ E α [ - ( t/ τ) α ], where E α denotes the Mittag-Leffler function of order α ∈ (0,1). By changing the inclination angle θ of the granular bed from horizontal, we have studied the impact of the effective gravitational acceleration g e ff = gsin θ on the relaxation features of the conductance σ( t). The characteristic timescale τ is found to grow when effective gravity g e ff decreases. By changing both the distance between the electrodes and the number of grains in the packing, we have shown that the long term resistance decay observed in the experiment is related to local micro-contacts rearrangements at each disk. By focusing on the electro-mechanical processes that allow both creation and breakdown of micro-contacts between two disks, we present an approach to granular conduction based on subordination of stochastic processes. In order to imitate, in a very simplified way, the conduction dynamics of granular material at low currents, we impose that the micro-contacts at the interface switch stochastically between two possible states, "on" and "off", characterizing the conductivity of the micro-contact. We assume that the time intervals between the consecutive changes of state are governed by a certain waiting-time distribution. It is demonstrated how the microscopic random dynamics regarding the micro-contacts leads to the macroscopic observation of slow conductance growth, described by an exact fractional kinetic equations.

Syngas generation from n-butane with an integrated MEMS assembly for gas processing in micro-solid oxide fuel cell systems.

PubMed

Bieberle-Hütter, A; Santis-Alvarez, A J; Jiang, B; Heeb, P; Maeder, T; Nabavi, M; Poulikakos, D; Niedermann, P; Dommann, A; Muralt, P; Bernard, A; Gauckler, L J

2012-11-21

An integrated system of a microreformer and a carrier allowing for syngas generation from liquefied petroleum gas (LPG) for micro-SOFC application is discussed. The microreformer with an overall size of 12.7 mm × 12.7 mm × 1.9 mm is fabricated with micro-electro-mechanical system (MEMS) technologies. As a catalyst, a special foam-like material made from ceria-zirconia nanoparticles doped with rhodium is used to fill the reformer cavity of 58.5 mm(3). The microreformer is fixed onto a microfabricated structure with built-in fluidic channels and integrated heaters, the so-called functional carrier. It allows for thermal decoupling of the cold inlet gas and the hot fuel processing zone. Two methods for heating the microreformer are compared in this study: a) heating in an external furnace and b) heating with the two built-in heaters on the functional carrier. With both methods, high butane conversion rates of 74%-85% are obtained at around 550 °C. In addition, high hydrogen and carbon monoxide yields and selectivities are achieved. The results confirm those from classical lab reformers built without MEMS technology (N. Hotz et al., Chem. Eng. Sci., 2008, 63, 5193; N. Hotz et al., Appl. Catal., B, 2007, 73, 336). The material combinations and processing techniques enable syngas production with the present MEMS based microreformer with high performance for temperatures up to 700 °C. The functional carrier is the basis for a new platform, which can integrate the micro-SOFC membranes and the gas processing unit as subsystem of an entire micro-SOFC system.

Superharmonic resonances in a two-dimensional non-linear photonic-crystal nano-electro-mechanical oscillator

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chowdhury, A.; Yeo, I.; Tsvirkun, V.

2016-04-18

We investigate the non-linear mechanical dynamics of a nano-optomechanical mirror formed by a suspended membrane pierced by a photonic crystal. By applying to the mirror a periodic electrostatic force induced by interdigitated electrodes integrated below the membrane, we evidence superharmonic resonances of our nano-electro-mechanical system; the constant phase shift of the oscillator across the resonance tongues is observed on the onset of principal harmonic and subharmonic excitation regimes.

The NASA GSFC MEMS Colloidal Thruster

NASA Technical Reports Server (NTRS)

Cardiff, Eric H.; Jamieson, Brian G.; Norgaard, Peter C.; Chepko, Ariane B.

2004-01-01

A number of upcoming missions require different thrust levels on the same spacecraft. A highly scaleable and efficient propulsion system would allow substantial mass savings. One type of thruster that can throttle from high to low thrust while maintaining a high specific impulse is a Micro-Electro-Mechanical System (MEMS) colloidal thruster. The NASA GSFC MEMS colloidal thruster has solved the problem of electrical breakdown to permit the integration of the electrode on top of the emitter by a novel MEMS fabrication technique. Devices have been successfully fabricated and the insulation properties have been tested to show they can support the required electric field. A computational finite element model was created and used to verify the voltage required to successfully operate the thruster. An experimental setup has been prepared to test the devices with both optical and Time-Of-Flight diagnostics.

Wheels With Sense

NASA Astrophysics Data System (ADS)

Cambridge, Dwayne; Clauss, Douglas; Hewson, Fraser; Brown, Robert; Hisrich, Robert; Taylor, Cyrus

2002-10-01

We describe a student intrapreneurial project in the Physics Entrepreneurship Program at Case Western Reserve University. At the request of a major fortune 100 company, a study has been made of the technical and marketing issues for a new business of selling sensors on commercial vehicle wheels for monitoring pressure, temperature, rotations, and vibrations, as well as providing identification. The nature of the physics involved in the choice of the appropriate device such as capacitive or piezoresistive sensors is discussed, along with the possibility of MEMS (micro-electro-mechanical systems) technology and RFID (radiofrequency identification) readout on wheels. Five options (status quo, in-house development, external business acquisition, a large business national partnership, and a small-business Cleveland consortium partnership) were studied from both technological and business perspectives to commercialize the technology. The decision making process for making a choice is explained.

A flexible surface wetness sensor using a RFID technique.

PubMed

Yang, Cheng-Hao; Chien, Jui-Hung; Wang, Bo-Yan; Chen, Ping-Hei; Lee, Da-Sheng

2008-02-01

This paper presents a flexible wetness sensor whose detection signal, converted to a binary code, is transmitted through radio-frequency (RF) waves from a radio-frequency identification integrated circuit (RFID IC) to a remote reader. The flexible sensor, with a fixed operating frequency of 13.56 MHz, contains a RFID IC and a sensor circuit that is fabricated on a flexible printed circuit board (FPCB) using a Micro-Electro-Mechanical-System (MEMS) process. The sensor circuit contains a comb-shaped sensing area surrounded by an octagonal antenna with a width of 2.7 cm. The binary code transmitted from the RFIC to the reader changes if the surface conditions of the detector surface changes from dry to wet. This variation in the binary code can be observed on a digital oscilloscope connected to the reader.

Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

NASA Astrophysics Data System (ADS)

Goldowsky, J.; Mastrangeli, M.; Jacot-Descombes, L.; Gullo, M. R.; Mermoud, G.; Brugger, J.; Martinoli, A.; Nelson, B. J.; Knapp, Helmut F.

2013-12-01

In this paper, we present the theoretical background, design, fabrication and characterization of a micromachined chamber assisting the fluidic self-assembly of micro-electro-mechanical systems in a bulk liquid. Exploiting bubble-induced acoustic microstreaming, several structurally-robust driving modes are excited inside the chamber. The modes promote the controlled aggregation and disaggregation of microcomponents relying on strong and reproducible fluid mixing effects achieved even at low Reynolds numbers. The functionality of the microfluidic chamber is demonstrated through the fast and repeatable geometrical pairing and subsequent unpairing of polymeric microcylinders. Relying only on drag and radiation forces and on the natural hydrophobicity of SU-8 in aqueous solutions, assembly yields of approximately 50% are achieved in no longer than ten seconds of agitation. The system can stochastically control the assembly process and significantly reduce the time-to-assembly of building blocks.

Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon

NASA Astrophysics Data System (ADS)

Lee, June Kyoo; Choi, Ju Chan; Jang, Won Ick; Kim, Hak-Rin; Kong, Seong Ho

2012-06-01

We demonstrate the design of an electrowetting lens employing a high-aspect-ratio hemispherical lens cavity and its micro-electro-mechanical-system (MEMS) fabrication process in this study. Our preliminary simulation results showed that the physical and electrical durability of the lens can be improved by the mitigation of stresses on the insulator at the hemispherical cavity. High-aspect-ratio hemispherical cavities with various diameters and very smooth sidewall surfaces were uniformly fabricated on a silicon wafer by a sophisticated isotropic wet etching technique. Moreover, we experimentally investigated the optical properties of the MEMS-based electrowetting lens with the proposed cavity. Two immiscible liquids in the proposed lens cavity were electrostatically controlled with negligible optical distortion and low focal-length hysteresis due to the fully axis-symmetrical geometry and smooth sidewall of the cavity.

A Palladium-Tin Modified Microband Electrode Array for Nitrate Determination

PubMed Central

Fu, Yexiang; Bian, Chao; Kuang, Jian; Wang, Jinfen; Tong, Jianhua; Xia, Shanhong

2015-01-01

A microband electrode array modified with palladium-tin bimetallic composite has been developed for nitrate determination. The microband electrode array was fabricated by Micro Electro-Mechanical System (MEMS) technique. Palladium and tin were electrodeposited successively on the electrode, forming a double-layer structure. The effect of the Pd-Sn composite was investigated and its enhancement of catalytic activity and lifetime was revealed. The Pd-Sn modified electrode showed good linearity (R2 = 0.998) from 1 mg/L to 20 mg/L for nitrate determination with a sensitivity of 398 μA/(mg∙L−1∙cm2). The electrode exhibited a satisfying analytical performance after 60 days of storage, indicating a long lifetime. Good repeatability was also displayed by the Pd-Sn modified electrodes. The results provided an option for nitrate determination in water. PMID:26389904

Differential wide temperature range CMOS interface circuit for capacitive MEMS pressure sensors.

PubMed

Wang, Yucai; Chodavarapu, Vamsy P

2015-02-12

We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between -55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%.

Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors

PubMed Central

Wang, Yucai; Chodavarapu, Vamsy P.

2015-01-01

We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between −55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%. PMID:25686312

A novel optimal configuration form redundant MEMS inertial sensors based on the orthogonal rotation method.

PubMed

Cheng, Jianhua; Dong, Jinlu; Landry, Rene; Chen, Daidai

2014-07-29

In order to improve the accuracy and reliability of micro-electro mechanical systems (MEMS) navigation systems, an orthogonal rotation method-based nine-gyro redundant MEMS configuration is presented. By analyzing the accuracy and reliability characteristics of an inertial navigation system (INS), criteria for redundant configuration design are introduced. Then the orthogonal rotation configuration is formed through a two-rotation of a set of orthogonal inertial sensors around a space vector. A feasible installation method is given for the real engineering realization of this proposed configuration. The performances of the novel configuration and another six configurations are comprehensively compared and analyzed. Simulation and experimentation are also conducted, and the results show that the orthogonal rotation configuration has the best reliability, accuracy and fault detection and isolation (FDI) performance when the number of gyros is nine.

Microwave heating of aqueous samples on a micro-optical-electro-mechanical system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Beer, Neil Reginald

2016-04-12

Apparatus for heating a sample includes a microchip; a microchannel flow channel in the microchip, the microchannel flow channel containing the sample; a microwave source that directs microwaves onto the sample for heating the sample; a wall section of the microchannel flow channel that receives the microwaves and enables the microwaves to pass through wall section of the microchannel flow channel, the wall section the microchannel flow channel being made of a material that is not appreciably heated by the microwaves; a carrier fluid within the microchannel flow channel for moving the sample in the microchannel flow channel, the carriermore » fluid being made of a material that is not appreciably heated by the microwaves; wherein the microwaves pass through wall section of the microchannel flow channel and heat the sample.« less

Demodulation algorithm for optical fiber F-P sensor.

PubMed

Yang, Huadong; Tong, Xinglin; Cui, Zhang; Deng, Chengwei; Guo, Qian; Hu, Pan

2017-09-10

The demodulation algorithm is very important to improving the measurement accuracy of a sensing system. In this paper, the variable step size hill climbing search method will be initially used for the optical fiber Fabry-Perot (F-P) sensing demodulation algorithm. Compared with the traditional discrete gap transformation demodulation algorithm, the computation is greatly reduced by changing step size of each climb, which could achieve nano-scale resolution, high measurement accuracy, high demodulation rates, and large dynamic demodulation range. An optical fiber F-P pressure sensor based on micro-electro-mechanical system (MEMS) has been fabricated to carry out the experiment, and the results show that the resolution of the algorithm can reach nano-scale level, the sensor's sensitivity is about 2.5  nm/KPa, which is similar to the theoretical value, and this sensor has great reproducibility.

Breaking the barriers to commercialization of MEMS: a firm's search for competitive advantage

NASA Astrophysics Data System (ADS)

Walsh, Steven T.; Linton, Jonathan D.

1999-08-01

A model of infrastructure development for MEMS manufacturing Technologies is offered. The role of discontinuous innovation in achieving competitive advantage is briefly reviewed. This is followed by the development of a model that describes the stages in the growth of an infrastructure to support Micro-Electro-Mechanical-Systems infrastructure. We briefly describe how an infrastructure gradually grows to support a new industry, resulting from discontinuous innovation. the model indicates the evolving nature of the actions and investments that firms and governments need to make to support the growth of an immature industry. Consequently, we aim to not only offer a descriptive model, but offer guidance to firms on whether their intentions and resources fit with the state of the industry and to offer policy makers guidance on the timing of different types of support.

Piezoresistive microcantilever based lab-on-a-chip system for detection of macronutrients in the soil

NASA Astrophysics Data System (ADS)

Patkar, Rajul S.; Ashwin, Mamta; Rao, V. Ramgopal

2017-12-01

Monitoring of soil nutrients is very important in precision agriculture. In this paper, we have demonstrated a micro electro mechanical system based lab-on-a-chip system for detection of various soil macronutrients which are available in ionic form K+, NO3-, and H2PO4-. These sensors are highly sensitive piezoresistive silicon microcantilevers coated with a polymer matrix containing methyltridodecylammonium nitrate ionophore/ nitrate ionophore VI for nitrate sensing, 18-crown-6 ether for potassium sensing and Tributyltin chloride for phosphate detection. A complete lab-on-a-chip system integrating a highly sensitive current excited Wheatstone's bridge based portable electronic setup along with arrays of microcantilever devices mounted on a printed circuit board with a liquid flow cell for on the site experimentation for soil test has been demonstrated.

Dynamic focus-tracking MEMS scanning micromirror with low actuation voltages for endoscopic imaging

PubMed Central

Strathman, Matthew; Liu, Yunbo; Li, Xingde; Lin, Lih Y.

2013-01-01

We demonstrate a 3-D scanning micromirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. 2-D beam scanning is achieved with a biaxial gimbal structure and focus control is obtained with a deformable mirror membrane surface. The micromirror with 800 micrometer diameter is designed to be sufficiently compact and efficient so that it can be incorporated into an endoscopic imaging probe in the future. The design, fabrication and characterization of the device are described in this paper. Using the focus-tracking MEMS scanning mirror, we achieved an optical scanning range of >16 degrees with <40 V actuation voltage at resonance and a tunable focal length between infinity and 25 mm with <100V applied bias. PMID:24104304

A new linear structured light module based on the MEMS micromirror

NASA Astrophysics Data System (ADS)

Zhou, Peng; Shen, Wenjiang; Yu, Huijun

2017-10-01

A new linear structured light module based on the Micro-Electro-Mechanical System (MEMS) two-dimensional scanning micromirror was designed and created. This module consists of a laser diode, a convex lens, and the MEMS micromirror. The laser diode generates the light and the convex lens control the laser beam to converge on a single point with large depth of focus. The fast scan in horizontal direction of the micromirror will turn the laser spot into a homogenous laser line. Meanwhile, the slow scan in vertical direction of the micromirror will move the laser line in the vertical direction. The width of the line generated by this module is 300μm and the length is 120mm and the moving distance is 100mm at 30cm away from the module. It will promote the development of industrial detection.

Microwave heating of aqueous samples on a micro-optical-electro-mechanical system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Beer, Neil Reginald

Apparatus for heating a sample includes a microchip; a microchannel flow channel in the microchip, the microchannel flow channel containing the sample; a microwave source that directs microwaves onto the sample for heating the sample; a wall section of the microchannel flow channel that receives the microwaves and enables the microwaves to pass through wall section of the microchannel flow channel, the wall section the microchannel flow channel being made of a material that is not appreciably heated by the microwaves; a carrier fluid within the microchannel flow channel for moving the sample in the microchannel flow channel, the carriermore » fluid being made of a material that is not appreciably heated by the microwaves; wherein the microwaves pass through wall section of the microchannel flow channel and heat the sample.« less

Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

NASA Astrophysics Data System (ADS)

Kohyama, Sumihiro; Takahashi, Hidetoshi; Yoshida, Satoru; Onoe, Hiroaki; Hirayama-Shoji, Kayoko; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

2018-04-01

This paper reports on a method to measure a spring constant on site using a micro electro mechanical systems (MEMS) force and displacement sensor. The proposed sensor consists of a force-sensing cantilever and a displacement-sensing cantilever. Each cantilever is composed of two beams with a piezoresistor on the sidewall for measuring the in-plane lateral directional force and displacement. The force resolution and displacement resolution of the fabricated sensor were less than 0.8 µN and 0.1 µm, respectively. We measured the spring constants of two types of hydrogel microparticles to demonstrate the effectiveness of the proposed sensor, with values of approximately 4.3 N m-1 and 15.1 N m-1 obtained. The results indicated that the proposed sensor is effective for on-site spring constant measurement.

Review of the potential of a wireless MEMS and TFT microsystems for the measurement of pressure in the GI tract.

PubMed

Arshak, A; Arshak, K; Waldron, D; Morris, D; Korostynska, O; Jafer, E; Lyons, G

2005-06-01

Telemetry capsules have existed since the 1950s and were used to measure temperature, pH or pressure inside the gastrointestinal (GI) tract. It was hoped that these capsules would replace invasive techniques in the diagnosis of function disorders in the GI tract. However, problems such as signal loss and uncertainty of the pills position limited their use in a clinical setting. In this paper, a review of the capabilities of MicroElectroMechanical Systems (MEMS) and thick film technology (TFT) for the fabrication of a wireless pressure sensing microsystem is presented. The circuit requirements and methods of data transfer are examined. The available fabrication methods for MEMS sensors are also discussed and examples of wireless sensors are given. Finally the limitations of each technology are examined.

Signal bi-amplification in networks of unidirectionally coupled MEMS

NASA Astrophysics Data System (ADS)

Tchakui, Murielle Vanessa; Woafo, Paul; Colet, Pere

2016-01-01

The purpose of this paper is to analyze the propagation and the amplification of an input signal in networks of unidirectionally coupled micro-electro-mechanical systems (MEMS). Two types of external excitations are considered: sinusoidal and stochastic signals. We show that sinusoidal signals are amplified up to a saturation level which depends on the transmission rate and despite MEMS being nonlinear the sinusoidal shape is well preserved if the number of MEMS is not too large. However, increasing the number of MEMS, there is an instability that leads to chaotic behavior and which is triggered by the amplification of the harmonics generated by the nonlinearities. We also show that for stochastic input signals, the MEMS array acts as a band-pass filter and after just a few elements the signal has a narrow power spectra.

Reliability modelling and analysis of thermal MEMS

NASA Astrophysics Data System (ADS)

Muratet, Sylvaine; Lavu, Srikanth; Fourniols, Jean-Yves; Bell, George; Desmulliez, Marc P. Y.

2006-04-01

This paper presents a MEMS reliability study methodology based on the novel concept of 'virtual prototyping'. This methodology can be used for the development of reliable sensors or actuators and also to characterize their behaviour in specific use conditions and applications. The methodology is demonstrated on the U-shaped micro electro thermal actuator used as test vehicle. To demonstrate this approach, a 'virtual prototype' has been developed with the modeling tools MatLab and VHDL-AMS. A best practice FMEA (Failure Mode and Effect Analysis) is applied on the thermal MEMS to investigate and assess the failure mechanisms. Reliability study is performed by injecting the identified defaults into the 'virtual prototype'. The reliability characterization methodology predicts the evolution of the behavior of these MEMS as a function of the number of cycles of operation and specific operational conditions.

Space Qualification Issues in Acousto-optic and Electro-optic Devices

NASA Technical Reports Server (NTRS)

Prasad, Narasimha S.; Taylor, Edward W.; Trivedi, Sudhir; Kutcher, Sue; Soos, Jolanta

2007-01-01

Satellite and space-based applications of photonic devices and systems require operational reliability in the harsh environment of space for extended periods of time. This in turn requires every component of the systems and their packaging to meet space qualifications. Acousto- and electro-optical devices form the major components of many current space based optical systems, which is the focus of this paper. The major space qualification issues are related to: mechanical stability, thermal effects and operation of the devices in the naturally occurring space radiation environment. This paper will discuss acousto- and electro-optic materials and devices with respect to their stability against mechanical vibrations, thermal cycling in operating and non-operating conditions and device responses to space ionizing and displacement radiation effects. Selection of suitable materials and packaging to meet space qualification criteria will also be discussed. Finally, a general roadmap for production and testing of acousto- and electro-optic devices will be discussed.

Formation of controllable polymer micropatterns through liquid film electro-dewetting

NASA Astrophysics Data System (ADS)

Zhou, Shangru; Zheng, Huai; Li, Guoliang; Liu, Jie; Liu, Sheng

2018-04-01

Controllable polymer micropatterns, served as indispensable function structures, are extensively required in many micro/nano scientific areas and engineering applications. Exploring advanced methods of fabricating micropatterns is always a research hotspot. In this article, we introduce a novel method of patterning polymer by the electro-dewetting induced by corona discharge. For the first time, it is observed experimentally that liquid polymer on conductive/non-conductive patterned substrates, spontaneously converges from non-conductive areas to conductive areas under the action of ion wind. Taking advantage of such a flow phenomenon, controllable polymer micropatterns including microbump arrays and microwell arrays are fabricated successfully. Their sizes range from hundreds of microns to millimeters. Micropattern surfaces present an ultra-smooth characteristic, with roughness in the nanometer range.

Electromechanical x-ray generator

DOEpatents

Watson, Scott A; Platts, David; Sorensen, Eric B

2016-05-03

An electro-mechanical x-ray generator configured to obtain high-energy operation with favorable energy-weight scaling. The electro-mechanical x-ray generator may include a pair of capacitor plates. The capacitor plates may be charged to a predefined voltage and may be separated to generate higher voltages on the order of hundreds of kV in the AK gap. The high voltage may be generated in a vacuum tube.

EXPERIMENTATION IN THE DEVELOPMENT OF MORE EFFECTIVE METHODS OF TEACHING FOREIGN LANGUAGES BY MAKING EXTENSIVE USE OF ELECTRO-MECHANICAL AIDS.

ERIC Educational Resources Information Center

LEWIS, EARL N.

AN EXPERIMENT WAS DESIGNED TO TEST THE HYPOTHESIS THAT PROPER USE OF ELECTRO-MECHANICAL AIDS CAN RELIEVE THE TEACHER OF A GREAT DEAL OF THE ROUTINE WORK OF TEACHING FOREIGN LANGUAGES. HE WOULD THUS BE ALLOWED TO EXTEND HIMSELF EITHER QUANTITATIVELY OR QUALITATIVELY IN HIS WORK. THIS EXPERIMENT USES THE QUALITATIVE APPROACH. THREE GROUPS OF…

A novel microfluidic valve controlledby induced charge electro-osmotic flow

NASA Astrophysics Data System (ADS)

Wang, Chengfa; Song, Yongxin; Pan, Xinxiang; Li, Dongqing

2016-07-01

In this paper, a novel microfluidic valve by utilizing induced charge electro-osmotic flow (ICEOF) is proposed and analyzed. The key part of the microfluidic valve is a Y-shaped microchannel. A small metal plate is placed at each corner of the junction of the Y-shaped microchannel. When a DC electrical field is applied through the channels, electro-osmotic flows occur in the channels, and two vortices will be formed near each of the metal plates due to the ICEOF. The two vortices behave like virtual ‘blocking columns’ to restrain and direct the flow in the Y-channel. In this paper, effects of the length of the metal plates, the applied voltages, the width of the microchannel, the zeta potential of the non-metal microchannel wall, and the orientation of the branch channels on the flow switching between two outlet channels are numerically investigated. The results show that the flow switching between the two outlet channels can be flexibly achieved by adjusting the applied DC voltages. The critical switching voltage (CSV), under which one outlet channel is closed, decreases with the increase in the metal plate length and the orientation angle of the outlet channels. The CSV, however, increases with the increase in the inlet voltage, the width of the microchannel, and the absolute value of the zeta potential of the non-metal microchannel wall. Compared with other types of micro-valves, the proposed micro-valve is simple in structure without any moving parts. Only a DC power source is needed for its actuation, thus it can operate automatically by controlling the applied voltages.

Integrated wireless systems: The future has arrived (Keynote Address)

NASA Astrophysics Data System (ADS)

Rivoir, Roberto

2005-06-01

It is believed that we are just at the beginning with wireless, and that a new age is dawning for this breakthrough technology. Thanks to several years of industrial manufacturing in mass-market applications such as cellular phones, wireless technology has nowadays reached a level of maturity that, combined with other achievements arising from different fields, such as information technology, artificial intelligence, pervasive computing, science of new materials, and micro-electro-mechanical systems (MEMS), will enable the realization of a networked stream-flow of real-time information, that will accompany us in our daily life, in a total seamless, transparent fashion. As almost any application scenario will require the deployment of complex, miniaturized, almost "invisible" systems, operating with different wireless standards, hard technological challenges will have to be faced for designing and fabricating ultra-low-cost, reconfigurable, and multi-mode heterogeneous smart micro-devices. But ongoing, unending progresses on wireless technology keeps the promise of helping to solve important societal problems in the health-care, safety, security, industry, environment sectors, and in general opening the possibility for an improved quality of life at work, on travel, at home, practically "everywhere, anytime".

Microfabricated Ion Beam Drivers for Magnetized Target Fusion

NASA Astrophysics Data System (ADS)

Persaud, Arun; Seidl, Peter; Ji, Qing; Ardanuc, Serhan; Miller, Joseph; Lal, Amit; Schenkel, Thomas

2015-11-01

Efficient, low-cost drivers are important for Magnetized Target Fusion (MTF). Ion beams offer a high degree of control to deliver the required mega joules of driver energy for MTF and they can be matched to several types of magnetized fuel targets, including compact toroids and solid targets. We describe an ion beam driver approach based on the MEQALAC concept (Multiple Electrostatic Quadrupole Array Linear Accelerator) with many beamlets in an array of micro-fabricated channels. The channels consist of a lattice of electrostatic quadrupoles (ESQ) for focusing and of radio-frequency (RF) electrodes for ion acceleration. Simulations with particle-in-cell and beam envelope codes predict >10x higher current densities compared to state-of-the-art ion accelerators. This increase results from dividing the total ion beam current up into many beamlets to control space charge forces. Focusing elements can be biased taking advantage of high breakdown electric fields in sub-mm structures formed using MEMS techniques (Micro-Electro-Mechanical Systems). We will present results on ion beam transport and acceleration in MEMS based beamlets. Acknowledgments: This work is supported by the U.S. DOE under Contract No. DE-AC02-05CH11231.

Dynamic modelling and experimental study of asymmetric optothermal microactuator

NASA Astrophysics Data System (ADS)

Wang, Shuying; Chun, Qin; You, Qingyang; Wang, Yingda; Zhang, Haijun

2017-01-01

This paper reports the dynamic modelling and experimental study of an asymmetric optothermal microactuator (OTMA). According to the principle of thermal flux, a theoretical model for instantaneous temperature distribution of an expansion arm is established and the expression of expansion increment is derived. Dynamic expansion properties of the arm under laser pulse irradiation are theoretically analyzed indicating that both of the maximum expansion and expansion amplitude decrease with the pulse frequency increasing. Experiments have been further carried out on an OTMA fabricated by using an excimer laser micromachining system. It is shown that the OTMA deflects periodically with the same frequency of laser pulse irradiation. Experimental results also prove that both OTMA's maximum deflection and deflection amplitude (related to maximum expansion and expansion amplitude of the arm) decrease as frequency increases, matching with the theoretical model quite well. Even though the OTMA's deflection decrease at higher frequency, it is still capable of generating 8.2 μm maximum deflection and 4.2 μm deflection amplitude under 17 Hz/2 mW laser pulse irradiation. This work improves the potential applications of optothermal microactuators in micro-opto-electro-mechanical system (MOEMS) and micro/nano-technology fields.

Aerospace Sensor Systems: From Sensor Development To Vehicle Application

NASA Technical Reports Server (NTRS)

Hunter, Gary W.

2008-01-01

This paper presents an overview of years of sensor system development and application for aerospace systems. The emphasis of this work is on developing advanced capabilities for measurement and control of aeropropulsion and crew vehicle systems as well as monitoring the safety of those systems. Specific areas of work include chemical species sensors, thin film thermocouples and strain gages, heat flux gages, fuel gages, SiC based electronic devices and sensors, space qualified electronics, and MicroElectroMechanical Systems (MEMS) as well as integrated and multifunctional sensor systems. Each sensor type has its own technical challenges related to integration and reliability in a given application. The general approach has been to develop base sensor technology using microfabrication techniques, integrate sensors with "smart" hardware and software, and demonstrate those systems in a range of aerospace applications. Descriptions of the sensor elements, their integration into sensors systems, and examples of sensor system applications will be discussed. Finally, suggestions related to the future of sensor technology will be given. It is concluded that smart micro/nano sensor technology can revolutionize aerospace applications, but significant challenges exist in maturing the technology and demonstrating its value in real-life applications.

Analysis of dual-frequency MEMS antenna using H-MRTD method

NASA Astrophysics Data System (ADS)

Yu, Wenge; Zhong, Xianxin; Chen, Yu; Wu, Zhengzhong

2004-10-01

For applying micro/nano technologies and Micro-Electro-Mechanical System (MEMS) technologies in the Radio Frequency (RF) field to manufacture miniature microstrip antennas. A novel MEMS dual-band patch antenna designed using slot-loaded and short-circuited size-reduction techniques is presented in this paper. By controlling the short-plane width, the two resonant frequencies, f10 and f30, can be significantly reduced and the frequency ratio (f30/f10) is tunable in the range 1.7~2.3. The Haar-Wavelet-Based multiresolution time domain (H-MRTD) with compactly supported scaling function for a full three-dimensional (3-D) wave to Yee's staggered cell is used for modeling and analyzing the antenna for the first time. Associated with practical model, an uniaxial perfectly matched layer (UPML) absorbing boundary conditions was developed, In addition , extending the mathematical formulae to an inhomogenous media. Numerical simulation results are compared with those using the conventional 3-D finite-difference time-domain (FDTD) method and measured. It has been demonstrated that, with this technique, space discretization with only a few cells per wavelength gives accurate results, leading to a reduction of both memory requirement and computation time.

A multilevel Lab on chip platform for DNA analysis.

PubMed

Marasso, Simone Luigi; Giuri, Eros; Canavese, Giancarlo; Castagna, Riccardo; Quaglio, Marzia; Ferrante, Ivan; Perrone, Denis; Cocuzza, Matteo

2011-02-01

Lab-on-chips (LOCs) are critical systems that have been introduced to speed up and reduce the cost of traditional, laborious and extensive analyses in biological and biomedical fields. These ambitious and challenging issues ask for multi-disciplinary competences that range from engineering to biology. Starting from the aim to integrate microarray technology and microfluidic devices, a complex multilevel analysis platform has been designed, fabricated and tested (All rights reserved-IT Patent number TO2009A000915). This LOC successfully manages to interface microfluidic channels with standard DNA microarray glass slides, in order to implement a complete biological protocol. Typical Micro Electro Mechanical Systems (MEMS) materials and process technologies were employed. A silicon/glass microfluidic chip and a Polydimethylsiloxane (PDMS) reaction chamber were fabricated and interfaced with a standard microarray glass slide. In order to have a high disposable system all micro-elements were passive and an external apparatus provided fluidic driving and thermal control. The major microfluidic and handling problems were investigated and innovative solutions were found. Finally, an entirely automated DNA hybridization protocol was successfully tested with a significant reduction in analysis time and reagent consumption with respect to a conventional protocol.

Electro-spun PLA-PEG-yarns for tissue engineering applications.

PubMed

Kruse, Magnus; Greuel, Marc; Kreimendahl, Franziska; Schneiders, Thomas; Bauer, Benedict; Gries, Thomas; Jockenhoevel, Stefan

2018-06-27

Electro-spinning is widely used in tissue-engineered applications mostly in form of non-woven structures. The development of e-spun yarn opens the door for textile fabrics which combine the micro to nanoscale dimension of electro-spun filaments with three-dimensional (3D) drapable textile fabrics. Therefore, the aim of the study was the implementation of a process for electro-spun yarns. Polylactic acid (PLA) and polyethylene glycol (PEG) were spun from chloroform solutions with varying PLA/PEG ratios (100:0, 90:10, 75:25 and 50:50). The yarn samples produced were analyzed regarding their morphology, tensile strength, water uptake and cytocompatibility. It was found that the yarn diameter decreased when the funnel collector rotation was increasd, however, the fiber diameter was not influenced. The tensile strength was also found to be dependent on the PEG content. While samples composed of 100% PLA showed a tensile strength of 2.5±0.7 cN/tex, the tensile strength increased with a decreasing PLA content (PLA 75%/PEG 25%) to 6.2±0.5 cN/tex. The variation of the PEG content also influenced the viscosity of the spinning solutions. The investigation of the cytocompatibility with endothelial cells was conducted for PLA/PEG 90:10 and 75:25 and indicated that the samples are cytocompatible.

Electro-Thermal-Mechanical Simulation Capability Final Report

DOE Office of Scientific and Technical Information (OSTI.GOV)

White, D

This is the Final Report for LDRD 04-ERD-086, 'Electro-Thermal-Mechanical Simulation Capability'. The accomplishments are well documented in five peer-reviewed publications and six conference presentations and hence will not be detailed here. The purpose of this LDRD was to research and develop numerical algorithms for three-dimensional (3D) Electro-Thermal-Mechanical simulations. LLNL has long been a world leader in the area of computational mechanics, and recently several mechanics codes have become 'multiphysics' codes with the addition of fluid dynamics, heat transfer, and chemistry. However, these multiphysics codes do not incorporate the electromagnetics that is required for a coupled Electro-Thermal-Mechanical (ETM) simulation. There aremore » numerous applications for an ETM simulation capability, such as explosively-driven magnetic flux compressors, electromagnetic launchers, inductive heating and mixing of metals, and MEMS. A robust ETM simulation capability will enable LLNL physicists and engineers to better support current DOE programs, and will prepare LLNL for some very exciting long-term DoD opportunities. We define a coupled Electro-Thermal-Mechanical (ETM) simulation as a simulation that solves, in a self-consistent manner, the equations of electromagnetics (primarily statics and diffusion), heat transfer (primarily conduction), and non-linear mechanics (elastic-plastic deformation, and contact with friction). There is no existing parallel 3D code for simulating ETM systems at LLNL or elsewhere. While there are numerous magnetohydrodynamic codes, these codes are designed for astrophysics, magnetic fusion energy, laser-plasma interaction, etc. and do not attempt to accurately model electromagnetically driven solid mechanics. This project responds to the Engineering R&D Focus Areas of Simulation and Energy Manipulation, and addresses the specific problem of Electro-Thermal-Mechanical simulation for design and analysis of energy manipulation systems such as magnetic flux compression generators and railguns. This project compliments ongoing DNT projects that have an experimental emphasis. Our research efforts have been encapsulated in the Diablo and ALE3D simulation codes. This new ETM capability already has both internal and external users, and has spawned additional research in plasma railgun technology. By developing this capability Engineering has become a world-leader in ETM design, analysis, and simulation. This research has positioned LLNL to be able to compete for new business opportunities with the DoD in the area of railgun design. We currently have a three-year $1.5M project with the Office of Naval Research to apply our ETM simulation capability to railgun bore life issues and we expect to be a key player in the railgun community.« less

Mathematical Modeling of Ammonia Electro-Oxidation on Polycrystalline Pt Deposited Electrodes

NASA Astrophysics Data System (ADS)

Diaz Aldana, Luis A.

The ammonia electrolysis process has been proposed as a feasible way for electrochemical generation of fuel grade hydrogen (H2). Ammonia is identified as one of the most suitable energy carriers due to its high hydrogen density, and its safe and efficient distribution chain. Moreover, the fact that this process can be applied even at low ammonia concentration feedstock opens its application to wastewater treatment along with H 2 co-generation. In the ammonia electrolysis process, ammonia is electro-oxidized in the anode side to produce N2 while H2 is evolved from water reduction in the cathode. A thermodynamic energy requirement of just five percent of the energy used in hydrogen production from water electrolysis is expected from ammonia electrolysis. However, the absence of a complete understanding of the reaction mechanism and kinetics involved in the ammonia electro-oxidation has not yet allowed the full commercialization of this process. For that reason, a kinetic model that can be trusted in the design and scale up of the ammonia electrolyzer needs to be developed. This research focused on the elucidation of the reaction mechanism and kinetic parameters for the ammonia electro-oxidation. The definition of the most relevant elementary reactions steps was obtained through the parallel analysis of experimental data and the development of a mathematical model of the ammonia electro-oxidation in a well defined hydrodynamic system, such as the rotating disk electrode (RDE). Ammonia electro-oxidation to N 2 as final product was concluded to be a slow surface confined process where parallel reactions leading to the deactivation of the catalyst are present. Through the development of this work it was possible to define a reaction mechanism and values for the kinetic parameters for ammonia electro-oxidation that allow an accurate representation of the experimental observations on a RDE system. Additionally, the validity of the reaction mechanism and kinetic parameters were supplemented by means of process scale up, performance evaluation, and hydrodynamic analysis in a flow cell electrolyzer. An adequate simulation of the flow electrolyzer performance was accomplished using the obtained kinetic parameters.

Sputtered highly oriented PZT thin films for MEMS applications

NASA Astrophysics Data System (ADS)

Kalpat, Sriram S.

Recently there has been an explosion of interest in the field of micro-electro-mechanical systems (MEMS). MEMS device technology has become critical in the growth of various fields like medical, automotive, chemical, and space technology. Among the many applications of ferroelectric thin films in MEMS devices, microfluidics is a field that has drawn considerable amount of research from bio-technology industries as well as chemical and semiconductor manufacturing industries. PZT thin films have been identified as best suited materials for micro-actuators and micro-sensors used in MEMS devices. A promising application for piezoelectric thin film based MEMS devices is disposable drug delivery systems that are capable of sensing biological parameters, mixing and delivering minute and precise amounts of drugs using micro-pumps or micro mixers. These devices call for low driving voltages, so that they can be battery operated. Improving the performance of the actuator material is critical in achieving battery operated disposal drug delivery systems. The device geometry and power consumption in MEMS devices largely depends upon the piezoelectric constant of the films, since they are most commonly used to convert electrical energy into a mechanical response of a membrane or cantilever and vice versa. Phenomenological calculation on the crystal orientation dependence of piezoelectric coefficients for PZT single crystal have reported a significant enhancement of the piezoelectric d33 constant by more than 3 times along [001] in the rhombohedral phase as compared to the conventionally used orientation PZT(111) since [111] is the along the spontaneous polarization direction. This could mean considerable improvement in the MEMS device performance and help drive the operating voltages lower. The motivation of this study is to investigate the crystal orientation dependence of both dielectric and piezoelectric coefficients of PZT thin films in order to select the appropriate orientation that could improve the MEMS device performance. Potential application of these devices is as battery operated disposable drug delivery systems. This work will also investigate the fabrication of a flexural plate wave based microfluidic device using the PZT thin film of appropriate orientation that would enhance the device performance. (Abstract shortened by UMI.)

Electro-Conductive Membranes for Permeation Enhancement and Fouling Mitigation: A Short Review

PubMed Central

Pantuso, Elvira; De Filpo, Giovanni; Nicoletta, Fiore Pasquale

2017-01-01

The research on electro-conductive membranes has expanded in recent years. These membranes have strong prospective as key components in next generation water treatment plants because they are engineered in order to enhance their performance in terms of separation, flux, fouling potential, and permselectivity. The present review summarizes recent developments in the preparation of electro-conductive membranes and the mechanisms of their response to external electric voltages in order to obtain an improvement in permeation and mitigation in the fouling growth. In particular, this paper deals with the properties of electro-conductive polymers and the preparation of electro-conductive polymer membranes with a focus on responsive membranes based on polyaniline, polypyrrole and carbon nanotubes. Then, some examples of electro-conductive membranes for permeation enhancement and fouling mitigation by electrostatic repulsion, hydrogen peroxide generation and electrochemical oxidation will be presented. PMID:28788091

Recent Progress on Cellulose-Based Electro-Active Paper, Its Hybrid Nanocomposites and Applications

PubMed Central

Khan, Asif; Abas, Zafar; Kim, Heung Soo; Kim, Jaehwan

2016-01-01

We report on the recent progress and development of research into cellulose-based electro-active paper for bending actuators, bioelectronics devices, and electromechanical transducers. The cellulose electro-active paper is characterized in terms of its biodegradability, chirality, ample chemically modifying capacity, light weight, actuation capability, and ability to form hybrid nanocomposites. The mechanical, electrical, and chemical characterizations of the cellulose-based electro-active paper and its hybrid composites such as blends or coatings with synthetic polymers, biopolymers, carbon nanotubes, chitosan, and metal oxides, are explained. In addition, the integration of cellulose electro-active paper is highlighted to form various functional devices including but not limited to bending actuators, flexible speaker, strain sensors, energy harvesting transducers, biosensors, chemical sensors and transistors for electronic applications. The frontiers in cellulose paper devices are reviewed together with the strategies and perspectives of cellulose electro-active paper and cellulose nanocomposite research and applications. PMID:27472335

Recent Progress on Cellulose-Based Electro-Active Paper, Its Hybrid Nanocomposites and Applications.

PubMed

Khan, Asif; Abas, Zafar; Kim, Heung Soo; Kim, Jaehwan

2016-07-26

We report on the recent progress and development of research into cellulose-based electro-active paper for bending actuators, bioelectronics devices, and electromechanical transducers. The cellulose electro-active paper is characterized in terms of its biodegradability, chirality, ample chemically modifying capacity, light weight, actuation capability, and ability to form hybrid nanocomposites. The mechanical, electrical, and chemical characterizations of the cellulose-based electro-active paper and its hybrid composites such as blends or coatings with synthetic polymers, biopolymers, carbon nanotubes, chitosan, and metal oxides, are explained. In addition, the integration of cellulose electro-active paper is highlighted to form various functional devices including but not limited to bending actuators, flexible speaker, strain sensors, energy harvesting transducers, biosensors, chemical sensors and transistors for electronic applications. The frontiers in cellulose paper devices are reviewed together with the strategies and perspectives of cellulose electro-active paper and cellulose nanocomposite research and applications.

41. View of electro/mechanical fiber optic system panel in transmitter ...

Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

41. View of electro/mechanical fiber optic system panel in transmitter building no. 102. Images projected to screen (panel at upper left) are projected to back side of screen located in MWOC to display changing information. - Clear Air Force Station, Ballistic Missile Early Warning System Site II, One mile west of mile marker 293.5 on Parks Highway, 5 miles southwest of Anderson, Anderson, Denali Borough, AK

A Numerical Study of Scalable Cardiac Electro-Mechanical Solvers on HPC Architectures

PubMed Central

Colli Franzone, Piero; Pavarino, Luca F.; Scacchi, Simone

2018-01-01

We introduce and study some scalable domain decomposition preconditioners for cardiac electro-mechanical 3D simulations on parallel HPC (High Performance Computing) architectures. The electro-mechanical model of the cardiac tissue is composed of four coupled sub-models: (1) the static finite elasticity equations for the transversely isotropic deformation of the cardiac tissue; (2) the active tension model describing the dynamics of the intracellular calcium, cross-bridge binding and myofilament tension; (3) the anisotropic Bidomain model describing the evolution of the intra- and extra-cellular potentials in the deforming cardiac tissue; and (4) the ionic membrane model describing the dynamics of ionic currents, gating variables, ionic concentrations and stretch-activated channels. This strongly coupled electro-mechanical model is discretized in time with a splitting semi-implicit technique and in space with isoparametric finite elements. The resulting scalable parallel solver is based on Multilevel Additive Schwarz preconditioners for the solution of the Bidomain system and on BDDC preconditioned Newton-Krylov solvers for the non-linear finite elasticity system. The results of several 3D parallel simulations show the scalability of both linear and non-linear solvers and their application to the study of both physiological excitation-contraction cardiac dynamics and re-entrant waves in the presence of different mechano-electrical feedbacks. PMID:29674971

Electro-mechanical response of a 3D nerve bundle model to mechanical loads leading to axonal injury.

PubMed

Cinelli, I; Destrade, M; Duffy, M; McHugh, P

2018-03-01

Traumatic brain injuries and damage are major causes of death and disability. We propose a 3D fully coupled electro-mechanical model of a nerve bundle to investigate the electrophysiological impairments due to trauma at the cellular level. The coupling is based on a thermal analogy of the neural electrical activity by using the finite element software Abaqus CAE 6.13-3. The model includes a real-time coupling, modulated threshold for spiking activation, and independent alteration of the electrical properties for each 3-layer fibre within a nerve bundle as a function of strain. Results of the coupled electro-mechanical model are validated with previously published experimental results of damaged axons. Here, the cases of compression and tension are simulated to induce (mild, moderate, and severe) damage at the nerve membrane of a nerve bundle, made of 4 fibres. Changes in strain, stress distribution, and neural activity are investigated for myelinated and unmyelinated nerve fibres, by considering the cases of an intact and of a traumatised nerve membrane. A fully coupled electro-mechanical modelling approach is established to provide insights into crucial aspects of neural activity at the cellular level due to traumatic brain injury. One of the key findings is the 3D distribution of residual stresses and strains at the membrane of each fibre due to mechanically induced electrophysiological impairments, and its impact on signal transmission. Copyright © 2017 John Wiley & Sons, Ltd.

Electro-osmotic flow of power-law fluid and heat transfer in a micro-channel with effects of Joule heating and thermal radiation

NASA Astrophysics Data System (ADS)

Shit, G. C.; Mondal, A.; Sinha, A.; Kundu, P. K.

2016-11-01

A mathematical model has been developed for studying the electro-osmotic flow and heat transfer of bio-fluids in a micro-channel in the presence of Joule heating effects. The flow of bio-fluid is governed by the non-Newtonian power-law fluid model. The effects of thermal radiation and velocity slip condition have been examined in the case of hydrophobic channel. The Poisson-Boltzmann equation governing the electrical double layer field and a body force generated by the applied electric potential field are taken into consideration. The results presented here pertain to the case where the height of the channel is much greater than the thickness of electrical double layer comprising the Stern and diffuse layers. The expressions for flow characteristics such as velocity, temperature, shear stress and Nusselt number have been derived analytically under the purview of the present model. The results estimated on the basis of the data available in the existing scientific literatures are presented graphically. The effects of thermal radiation have an important bearing on the therapeutic procedure of hyperthermia, particularly in understanding the heat transfer in micro-channel in the presence of electric potential. The dimensionless Joule heating parameter has a reducing impact on Nusselt number for both pseudo-plastic and dilatant fluids, nevertheless its impact on Nusselt number is more pronounced for dilatant fluid. Furthermore, the effect of viscous dissipation has a significant role in controlling heat transfer and should not be neglected.

EDITORIAL: Selected papers from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011) Selected papers from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011)

NASA Astrophysics Data System (ADS)

Cho, Young-Ho

2012-09-01

This special section of Journal of Micromechanics and Microengineering features papers selected from the 11th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2011), held at Sejong Hotel in Seoul, Korea during 15-18 November 2011. Since the first PowerMEMS workshop held in Sendai, Japan in 2000, the workshop has developed as the premier forum for reporting research results in micro and nanotechnology for power generation, energy conversion, harvesting and processing applications, including in-depth technical issues on nanostructures and materials for small-scale high-density energy and thermal management. Potential PowerMEMS applications cover not only portable power devices for consumer electronics and remote sensors, but also micro engines, impulsive thrusters and fuel cells for systems ranging from the nanometer to the millimeter scale. The 2011 technical program consists of 1 plenary talk, 4 invited talks and 118 contributed presentations. The 48 oral and 70 poster presentations, selected by 27 Technical Program Committee Members from 131 submitted abstracts, have stimulated lively discussion maximizing the interaction between participants. Among them, this special section includes 9 papers covering micro-scale power generators, energy converters, harvesters, thrusters and thermal coolers. Finally, we are grateful to the members of the International Steering Committee, the Technical Program Committee, and the Local Organizing Committee for their efforts and contributions to PowerMEMS 2011. We also thank the two companies Samsung Electro-Mechanics and LG Elite for technical tour arrangements. Special thanks go to Dr Ian Forbes, the editorial staff of the Journal of Micromechanics and Microengineering, as well as to the staff of IOP Publishing for making this special section possible.

Research on SOI-based micro-resonator devices

NASA Astrophysics Data System (ADS)

Xiao, Xi; Xu, Haihua; Hu, Yingtao; Zhou, Liang; Xiong, Kang; Li, Zhiyong; Li, Yuntao; Fan, Zhongchao; Han, Weihua; Yu, Yude; Yu, Jinzhong

2010-10-01

SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide, microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.

Investigation of local strain distribution and linear electro-optic effect in strained silicon waveguides.

PubMed

Chmielak, Bartos; Matheisen, Christopher; Ripperda, Christian; Bolten, Jens; Wahlbrink, Thorsten; Waldow, Michael; Kurz, Heinrich

2013-10-21

We present detailed investigations of the local strain distribution and the induced second-order optical nonlinearity within strained silicon waveguides cladded with a Si₃N₄ strain layer. Micro-Raman Spectroscopy mappings and electro-optic characterization of waveguides with varying width w(WG) show that strain gradients in the waveguide core and the effective second-order susceptibility χ(2)(yyz) increase with reduced w(WG). For 300 nm wide waveguides a mean effective χ(2)(yyz) of 190 pm/V is achieved, which is the highest value reported for silicon so far. To gain more insight into the origin of the extraordinary large optical second-order nonlinearity of strained silicon waveguides numerical simulations of edge induced strain gradients in these structures are presented and discussed.

Damage Detection Based on Power Dissipation Measured with PZT Sensors through the Combination of Electro-Mechanical Impedances and Guided Waves

PubMed Central

Sevillano, Enrique; Sun, Rui; Perera, Ricardo

2016-01-01

The use of piezoelectric ceramic transducers (such as Lead-Zirconate-Titanate—PZT) has become more and more widespread for Structural Health Monitoring (SHM) applications. Among all the techniques that are based on this smart sensing solution, guided waves and electro-mechanical impedance techniques have found wider acceptance, and so more studies and experimental works can be found containing these applications. However, even though these two techniques can be considered as complementary to each other, little work can be found focused on the combination of them in order to define a new and integrated damage detection procedure. In this work, this combination of techniques has been studied by proposing a new integrated damage indicator based on Electro-Mechanical Power Dissipation (EMPD). The applicability of this proposed technique has been tested through different experimental tests, with both lab-scale and real-scale structures. PMID:27164104

Damage Detection Based on Power Dissipation Measured with PZT Sensors through the Combination of Electro-Mechanical Impedances and Guided Waves.

PubMed

Sevillano, Enrique; Sun, Rui; Perera, Ricardo

2016-05-05

The use of piezoelectric ceramic transducers (such as Lead-Zirconate-Titanate-PZT) has become more and more widespread for Structural Health Monitoring (SHM) applications. Among all the techniques that are based on this smart sensing solution, guided waves and electro-mechanical impedance techniques have found wider acceptance, and so more studies and experimental works can be found containing these applications. However, even though these two techniques can be considered as complementary to each other, little work can be found focused on the combination of them in order to define a new and integrated damage detection procedure. In this work, this combination of techniques has been studied by proposing a new integrated damage indicator based on Electro-Mechanical Power Dissipation (EMPD). The applicability of this proposed technique has been tested through different experimental tests, with both lab-scale and real-scale structures.

System Model for MEMS based Laser Ultrasonic Receiver

NASA Technical Reports Server (NTRS)

Wilson, William C.

2002-01-01

A need has been identified for more advanced nondestructive Evaluation technologies for assuring the integrity of airframe structures, wiring, etc. Laser ultrasonic inspection instruments have been shown to detect flaws in structures. However, these instruments are generally too bulky to be used in the confined spaces that are typical of aerospace vehicles. Microsystems technology is one key to reducing the size of current instruments and enabling increased inspection coverage in areas that were previously inaccessible due to instrument size and weight. This paper investigates the system modeling of a Micro OptoElectroMechanical System (MOEMS) based laser ultrasonic receiver. The system model is constructed in software using MATLAB s dynamical simulator, Simulink. The optical components are modeled using geometrical matrix methods and include some image processing. The system model includes a test bench which simulates input stimuli and models the behavior of the material under test.

Analysis of a Chevron Beam Thermal Actuator

NASA Astrophysics Data System (ADS)

Joshi, Amey Sanjay; Mohammed, Hussain; Kulkarni, S. M., Dr.

2018-02-01

Thermal MEMS (Micro-Electro-Mechanical Systems) actuators and sensors have a wide range of applications. The chevron type thermal actuators comparatively show superior performance over other existing electrostatic and thermal actuators. This paper describes the design and analysis of chevron type thermal actuator. Here standard design of Chevron type thermal actuator is considered which comprises of proof mass at center and array of six beams of a uniform cross section of 3 3 microns and an initial angle of 5°. The thermal actuator was designed and analyzed using analytical and finite element method and the results were compared. The model was also analyzed for initial angles of 2.5° and 7.5°, and the results were compared with FEA model. The cross section of the beam was varied and the finite element analysis of all three models was compared to suggest the best suitable thermal actuator structure.

Fabrication and electrical characterization of partially metallized vias fabricated by inkjet

NASA Astrophysics Data System (ADS)

Khorramdel, B.; Mäntysalo, M.

2016-04-01

Through silicon vias (TSVs), acting as vertical interconnections, play an important role in micro-electro-mechanical systems (MEMS) 3D wafer level packaging. Today, taking advantage of nanoparticle inks, inkjet technologies as local filling methods could be used to plate the inside the vias with a conductive material, rather than using a current method, such as chemical vapor deposition or electrolytic growth. This could decrease the processing time, cost and waste material produced. In this work, we have fabricated and demonstrated electrical characterization of TSVs with a top diameter of 85 μm, and partially metallized on their inside walls using silver nanoparticle ink and drop-on-demand inkjet printing. Electrical measurement showed that the resistance of a single via with a void free coverage from top to bottom could be less than 4 Ω, which is still acceptable for MEMS applications.

A Robust Real Time Direction-of-Arrival Estimation Method for Sequential Movement Events of Vehicles.

PubMed

Liu, Huawei; Li, Baoqing; Yuan, Xiaobing; Zhou, Qianwei; Huang, Jingchang

2018-03-27

Parameters estimation of sequential movement events of vehicles is facing the challenges of noise interferences and the demands of portable implementation. In this paper, we propose a robust direction-of-arrival (DOA) estimation method for the sequential movement events of vehicles based on a small Micro-Electro-Mechanical System (MEMS) microphone array system. Inspired by the incoherent signal-subspace method (ISM), the method that is proposed in this work employs multiple sub-bands, which are selected from the wideband signals with high magnitude-squared coherence to track moving vehicles in the presence of wind noise. The field test results demonstrate that the proposed method has a better performance in emulating the DOA of a moving vehicle even in the case of severe wind interference than the narrowband multiple signal classification (MUSIC) method, the sub-band DOA estimation method, and the classical two-sided correlation transformation (TCT) method.

Amorphous titanium-oxide supercapacitors.

PubMed

Fukuhara, Mikio; Kuroda, Tomoyuki; Hasegawa, Fumihiko

2016-10-21

The electric capacitance of an amorphous TiO 2-x surface increases proportionally to the negative sixth power of the convex diameter d. This occurs because of the van der Waals attraction on the amorphous surface of up to 7 mF/cm 2 , accompanied by extreme enhanced electron trapping resulting from both the quantum-size effect and an offset effect from positive charges at oxygen-vacancy sites. Here we show that a supercapacitor, constructed with a distributed constant-equipment circuit of large resistance and small capacitance on the amorphous TiO 2-x surface, illuminated a red LED for 37 ms after it was charged with 1 mA at 10 V. The fabricated device showed no dielectric breakdown up to 1,100 V. Based on this approach, further advances in the development of amorphous titanium-dioxide supercapacitors might be attained by integrating oxide ribbons with a micro-electro mechanical system.

Epitaxial strain relaxation by provoking edge dislocation dipoles

NASA Astrophysics Data System (ADS)

Soufi, A.; El-Hami, K.

2018-02-01

Thin solid films have been used in various devices and engineering systems such as rapid development of highly integrated electronic circuits, the use of surface coatings to protect structural materials in high temperature environments, and thin films are integral parts of many micro-electro-mechanical systems designed to serve as sensors, actuators. Among techniques of ultra-thin films deposition, the heteroepitaxial method becomes the most useful at nanoscale level to obtain performed materials in various applications areas. On the other hand, stresses that appeared during the elaboration of thin films could rise deformations and fractures in materials. The key solution to solve this problem at the nanoscale level is the nucleation of interface dislocations from free surfaces. By provoking edge dislocation dipoles we obtained a strain relaxation in thin films. Moreover, the dynamic of nucleation in edge dislocations from free lateral surfaces was also studied.

The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

PubMed Central

Shi, Yunbo; Yang, Zhicai; Ma, Zongmin; Cao, Huiliang; Kou, Zhiwei; Zhi, Dan; Chen, Yanxiang; Feng, Hengzhen; Liu, Jun

2016-01-01

Despite its extreme significance, dynamic linearity measurement for high-g accelerometers has not been discussed experimentally in previous research. In this study, we developed a novel method using a dual-warhead Hopkinson bar to measure the dynamic linearity of a high-g acceleration sensor with a laser interference impact experiment. First, we theoretically determined that dynamic linearity is a performance indicator that can be used to assess the quality merits of high-g accelerometers and is the basis of the frequency response. We also found that the dynamic linearity of the dual-warhead Hopkinson bar without an accelerometer is 2.5% experimentally. Further, we verify that dynamic linearity of the accelerometer is 3.88% after calibrating the Hopkinson bar with the accelerometer. The results confirm the reliability and feasibility of measuring dynamic linearity for high-g accelerometers using this method. PMID:27338383

Real-time observation of slipping and rolling events in DLC wear nanoparticles.

PubMed

Sato, Takaaki; Nabeya, Shinsuke; Menon, Vivek; Ishida, Tadashi; Kometani, Reo; Fujita, Hiroyuki

2018-08-10

Real-time observation of the actual contact area between surface interfaces at the nanoscale enables more precise examination of what happens during friction. We have combined micro electro mechanical system actuators and transmission electron microscopy (TEM) observation, to both apply and measure forces across nanoscale junctions and contacts. This custom-designed experimental system can measure the true surface area of a contact site from a lateral viewpoint, while simultaneously measuring the friction force. We scratched surfaces coated with diamond like carbon, a classical solid lubricant, and observed the formation of wear particles that slipped and rolled between the interface. TEM images showed that the shape of the surface at the nanoscale underwent permanent deformation when acted upon with forces as low as several tens of nano newtons. The results demonstrated the limitations of friction analyses relying on friction force measurements without real-time surface profiling.

Amorphous titanium-oxide supercapacitors

NASA Astrophysics Data System (ADS)

Fukuhara, Mikio; Kuroda, Tomoyuki; Hasegawa, Fumihiko

2016-10-01

The electric capacitance of an amorphous TiO2-x surface increases proportionally to the negative sixth power of the convex diameter d. This occurs because of the van der Waals attraction on the amorphous surface of up to 7 mF/cm2, accompanied by extreme enhanced electron trapping resulting from both the quantum-size effect and an offset effect from positive charges at oxygen-vacancy sites. Here we show that a supercapacitor, constructed with a distributed constant-equipment circuit of large resistance and small capacitance on the amorphous TiO2-x surface, illuminated a red LED for 37 ms after it was charged with 1 mA at 10 V. The fabricated device showed no dielectric breakdown up to 1,100 V. Based on this approach, further advances in the development of amorphous titanium-dioxide supercapacitors might be attained by integrating oxide ribbons with a micro-electro mechanical system.

A review of MEMS micropropulsion technologies for CubeSats and PocketQubes

NASA Astrophysics Data System (ADS)

Silva, Marsil A. C.; Guerrieri, Daduí C.; Cervone, Angelo; Gill, Eberhard

2018-02-01

CubeSats have been extensively used in the past decade as scientific tools, technology demonstrators and for education. Recently, PocketQubes have emerged as an interesting and even smaller alternative to CubeSats. However, both satellite types often lack some key capabilities, such as micropropulsion, in order to further extend the range of applications of these small satellites. This paper reviews the current development status of micropropulsion systems fabricated with MEMS (micro electro-mechanical systems) and silicon technology intended to be used in CubeSat or PocketQube missions and compares different technologies with respect to performance parameters such as thrust, specific impulse, and power as well as in terms of operational complexity. More than 30 different devices are analyzed and divided into 7 main categories according to the working principle. A specific outcome of the research is the identification of the current status of MEMS technologies for micropropulsion including key opportunities and challenges.

Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup

NASA Astrophysics Data System (ADS)

Faller, Lisa-Marie; Zangl, Hubert

2017-05-01

To guarantee high performance of Micro Optical Electro Mechanical Systems (MOEMS), precise position feedback is crucial. To overcome drawbacks of widely used optical feedback, we propose an inkjet-printed capacitive position sensor as smart packaging solution. Printing processes suffer from tolerances in excess of those from standard processes. Thus, FEM simulations covering assumed tolerances of the system are adopted. These simulations are structured following a Design Of Computer Experiments (DOCE) and are then employed to determine a optimal sensor design. Based on the simulation results, statistical models are adopted for the dynamic system. These models are to be used together with specifically designed hardware, considered to cope with challenging requirements of ≍50nm position accuracy at 10MS/s with 1000μm measurement range. Noise analysis is performed considering the influence of uncertainties to assess resolution and bandwidth capabilities.

Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope

NASA Astrophysics Data System (ADS)

Krauter, Johann; Osten, Wolfgang

2018-03-01

There are a wide range of applications for micro-electro-mechanical systems (MEMS). The automotive and consumer market is the strongest driver for the growing MEMS industry. A 100 % test of MEMS is particularly necessary since these are often used for safety-related purposes such as the ESP (Electronic Stability Program) system. The production of MEMS is a fully automated process that generates 90 % of the costs during the packaging and dicing steps. Nowadays, an electrical test is carried out on each individual MEMS component before these steps. However, after encapsulation, MEMS are opaque to visible light and other defects cannot be detected. Therefore, we apply an infrared low-coherence interferometer for the topography measurement of those hidden structures. A lock-in algorithm-based method is shown to calculate the object height and to reduce ghost steps due to the 2π -unambiguity. Finally, measurements of different MEMS-based sensors are presented.

Theoretical calculations and performance results of a PZT thin film actuator.

PubMed

Hoffmann, Marcus; Küppers, Hartmut; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

2003-10-01

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 microm, the actuator was designed with a cantilever length of 300 microm to 1000 microm. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.

Superior electric storage on an amorphous perfluorinated polymer surface

PubMed Central

Fukuhara, Mikio; Kuroda, Tomoyuki; Hasegawa, Fumihiko; Sueyoshi, Takashi

2016-01-01

Amorphous perfluoroalkenyl vinyl ether polymer devices can store a remarkably powerful electric charge because their surface contains nanometre-sized cavities that are sensitive to the so-called quantum-size effect. With a work function of approximately 10 eV, the devices show a near-vertical line in the Nyquist diagram and a horizontal line near the −90° phase angle in the Bode diagram. Moreover, they have an integrated effect on the surface area for constant current discharging. This effect can be explained by the distributed constant electric circuit with a parallel assembly of nanometre-sized capacitors on a highly insulating polymer. The device can illuminate a red LED light for 3 ms after charging it with 1 mA at 10 V. Further gains might be attained by integrating polymer sheets with a micro-electro mechanical system. PMID:26902953

Adaptive UAV Attitude Estimation Employing Unscented Kalman Filter, FOAM and Low-Cost MEMS Sensors

PubMed Central

de Marina, Héctor García; Espinosa, Felipe; Santos, Carlos

2012-01-01

Navigation employing low cost MicroElectroMechanical Systems (MEMS) sensors in Unmanned Aerial Vehicles (UAVs) is an uprising challenge. One important part of this navigation is the right estimation of the attitude angles. Most of the existent algorithms handle the sensor readings in a fixed way, leading to large errors in different mission stages like take-off aerobatic maneuvers. This paper presents an adaptive method to estimate these angles using off-the-shelf components. This paper introduces an Attitude Heading Reference System (AHRS) based on the Unscented Kalman Filter (UKF) using the Fast Optimal Attitude Matrix (FOAM) algorithm as the observation model. The performance of the method is assessed through simulations. Moreover, field experiments are presented using a real fixed-wing UAV. The proposed low cost solution, implemented in a microcontroller, shows a satisfactory real time performance. PMID:23012559

Differential pressure distribution measurement for the development of insect-sized wings

NASA Astrophysics Data System (ADS)

Takahashi, Hidetoshi; Matsumoto, Kiyoshi; Shimoyama, Isao

2013-05-01

This paper reports on the measurement of the differential pressure distribution over a flat, thin wing using a micro-electro-mechanical systems sensor. Sensors featuring a piezoresistive cantilever were attached to a polyimide/Cu wing. Because the weight of the cantilever element was less than 10 ng, the sensor can measure the differential pressure without interference from inertial forces, such as wing flapping motions. The dimensions of the sensor chips and the wing were 1.0 mm × 1.0 mm × 0.3 mm and 100 mm × 30 mm × 1 mm, respectively. The differential pressure distribution along the wing's chord direction was measured in a wind tunnel at an air velocity of 4.0 m s­-1 by changing the angle of attack. It was confirmed that the pressure coefficient calculated by the measured differential pressure distribution was similar to the value measured by a load cell.

MEMS- and LC-adaptive optics at the Naval Research Laboratory

NASA Astrophysics Data System (ADS)

Restaino, S. R.; Wilcox, C. C.; Martinez, T.; Andrews, J. R.; Santiago, F.; Payne, D. M.

2012-06-01

Adaptive Optics (AO) is an ensemble of techniques that aims at the remedial of the deleterious effects that the Earth's turbulent atmosphere induces on both imagery and signal gathering in real time. It has been over four decades since the first AO system was developed and tested. During this time important technological advances have changed profoundly the way that we think and develop AO systems. The use of Micro-Electro-Mechanical-Systems (MEMS) devices and Liquid Crystal Devices (LCD) has revolutionized these technologies making possible to go from very expensive, very large and power consuming systems to very compact and inexpensive systems. These changes have rendered AO systems useful and applicable in other fields ranging from medical imaging to industry. In this paper we will review the research efforts at the Naval research Laboratory (NRL) to develop AO systems based on both MEMs and LCD in order to produce more compact and light weight AO systems.

Validation of a wireless modular monitoring system for structures

NASA Astrophysics Data System (ADS)

Lynch, Jerome P.; Law, Kincho H.; Kiremidjian, Anne S.; Carryer, John E.; Kenny, Thomas W.; Partridge, Aaron; Sundararajan, Arvind

2002-06-01

A wireless sensing unit for use in a Wireless Modular Monitoring System (WiMMS) has been designed and constructed. Drawing upon advanced technological developments in the areas of wireless communications, low-power microprocessors and micro-electro mechanical system (MEMS) sensing transducers, the wireless sensing unit represents a high-performance yet low-cost solution to monitoring the short-term and long-term performance of structures. A sophisticated reduced instruction set computer (RISC) microcontroller is placed at the core of the unit to accommodate on-board computations, measurement filtering and data interrogation algorithms. The functionality of the wireless sensing unit is validated through various experiments involving multiple sensing transducers interfaced to the sensing unit. In particular, MEMS-based accelerometers are used as the primary sensing transducer in this study's validation experiments. A five degree of freedom scaled test structure mounted upon a shaking table is employed for system validation.

Micromachined chemical jet dispenser

DOEpatents

Swierkowski, Steve P.

1999-03-02

A dispenser for chemical fluid samples that need to be precisely ejected in size, location, and time. The dispenser is a micro-electro-mechanical systems (MEMS) device fabricated in a bonded silicon wafer and a substrate, such as glass or silicon, using integrated circuit-like fabrication technology which is amenable to mass production. The dispensing is actuated by ultrasonic transducers that efficiently produce a pressure wave in capillaries that contain the chemicals. The 10-200 .mu.m diameter capillaries can be arranged to focus in one spot or may be arranged in a larger dense linear array (.about.200 capillaries). The dispenser is analogous to some ink jet print heads for computer printers but the fluid is not heated, thus not damaging certain samples. Major applications are in biological sample handling and in analytical chemical procedures such as environmental sample analysis, medical lab analysis, or molecular biology chemistry experiments.

In-situ Monitoring of Internal Local Temperature and Voltage of Proton Exchange Membrane Fuel Cells

PubMed Central

Lee, Chi-Yuan; Fan, Wei-Yuan; Hsieh, Wei-Jung

2010-01-01

The distribution of temperature and voltage of a fuel cell are key factors that influence performance. Conventional sensors are normally large, and are also useful only for making external measurements of fuel cells. Centimeter-scale sensors for making invasive measurements are frequently unable to accurately measure the interior changes of a fuel cell. This work focuses mainly on fabricating flexible multi-functional microsensors (for temperature and voltage) to measure variations in the local temperature and voltage of proton exchange membrane fuel cells (PEMFC) that are based on micro-electro-mechanical systems (MEMS). The power density at 0.5 V without a sensor is 450 mW/cm2, and that with a sensor is 426 mW/cm2. Since the reaction area of a fuel cell with a sensor is approximately 12% smaller than that without a sensor, but the performance of the former is only 5% worse. PMID:22163556

In-situ monitoring of internal local temperature and voltage of proton exchange membrane fuel cells.

PubMed

Lee, Chi-Yuan; Fan, Wei-Yuan; Hsieh, Wei-Jung

2010-01-01

The distribution of temperature and voltage of a fuel cell are key factors that influence performance. Conventional sensors are normally large, and are also useful only for making external measurements of fuel cells. Centimeter-scale sensors for making invasive measurements are frequently unable to accurately measure the interior changes of a fuel cell. This work focuses mainly on fabricating flexible multi-functional microsensors (for temperature and voltage) to measure variations in the local temperature and voltage of proton exchange membrane fuel cells (PEMFC) that are based on micro-electro-mechanical systems (MEMS). The power density at 0.5 V without a sensor is 450 mW/cm(2), and that with a sensor is 426 mW/cm(2). Since the reaction area of a fuel cell with a sensor is approximately 12% smaller than that without a sensor, but the performance of the former is only 5% worse.

Wireless Power Transfer for Autonomous Wearable Neurotransmitter Sensors.

PubMed

Nguyen, Cuong M; Kota, Pavan Kumar; Nguyen, Minh Q; Dubey, Souvik; Rao, Smitha; Mays, Jeffrey; Chiao, J-C

2015-09-23

In this paper, we report a power management system for autonomous and real-time monitoring of the neurotransmitter L-glutamate (L-Glu). A low-power, low-noise, and high-gain recording module was designed to acquire signal from an implantable flexible L-Glu sensor fabricated by micro-electro-mechanical system (MEMS)-based processes. The wearable recording module was wirelessly powered through inductive coupling transmitter antennas. Lateral and angular misalignments of the receiver antennas were resolved by using a multi-transmitter antenna configuration. The effective coverage, over which the recording module functioned properly, was improved with the use of in-phase transmitter antennas. Experimental results showed that the recording system was capable of operating continuously at distances of 4 cm, 7 cm and 10 cm. The wireless power management system reduced the weight of the recording module, eliminated human intervention and enabled animal experimentation for extended durations.

Magnetic light cloaking control in the marine planktonic copepod Sapphirina

NASA Astrophysics Data System (ADS)

Kashiwagi, H.; Mizukawa, Y.; Iwasaka, M.; Ohtsuka, S.

2017-05-01

We investigated the light cloaking behavior of the marine planktonic copepod Sapphirina under a magnetic field. Optical interferences in the multi-laminated guanine crystal layer beneath the dorsal body surface create a brilliant structural color, which can be almost entirely removed by changing the light reflection. In the investigation, we immersed segments of Sapphirina in seawater contained in an optical chamber. When the derived Sapphirina segments were attached to the container surface, they were inert to magnetic fields up to 300 mT. However, when the back plate segments were attached to the substrate at a point, with most of the plate floating in the seawater, the plate rotated oppositely to the applied magnetic field. In addition, the brilliant parts of the Sapphirina back plate rotated backward and forward by changing the magnetic field directions. Our experiment suggests a new model of an optical micro-electro-mechanical system that is controllable by magnetic fields.

Large-stroke convex micromirror actuated by electromagnetic force for optical power control.

PubMed

Hossain, Md Mahabub; Bin, Wu; Kong, Seong Ho

2015-11-02

This paper contributes a novel design and the corresponding fabrication process to research on the unique topic of micro-electro-mechanical systems (MEMS) deformable convex micromirror used for focusing-power control. In this design, the shape of a thin planar metal-coated polymer-membrane mirror is controlled electromagnetically by using the repulsive force between two magnets, a permanent magnet and a coil solenoid, installed in an actuator system. The 5 mm effective aperture of a large-stroke micromirror showed a maximum center displacement of 30.08 µm, which enabled control of optical power across a wide range that could extend up to around 20 diopters. Specifically, utilizing the maximum optical power of 20 diopter by applying a maximum controlling current of 0.8 A yielded consumption of at most 2 W of electrical power. It was also demonstrated that this micromirror could easily be integrated in miniature tunable optical imaging systems.

Molecular Momentum Transport at Fluid-Solid Interfaces in MEMS/NEMS: A Review

PubMed Central

Cao, Bing-Yang; Sun, Jun; Chen, Min; Guo, Zeng-Yuan

2009-01-01

This review is focused on molecular momentum transport at fluid-solid interfaces mainly related to microfluidics and nanofluidics in micro-/nano-electro-mechanical systems (MEMS/NEMS). This broad subject covers molecular dynamics behaviors, boundary conditions, molecular momentum accommodations, theoretical and phenomenological models in terms of gas-solid and liquid-solid interfaces affected by various physical factors, such as fluid and solid species, surface roughness, surface patterns, wettability, temperature, pressure, fluid viscosity and polarity. This review offers an overview of the major achievements, including experiments, theories and molecular dynamics simulations, in the field with particular emphasis on the effects on microfluidics and nanofluidics in nanoscience and nanotechnology. In Section 1 we present a brief introduction on the backgrounds, history and concepts. Sections 2 and 3 are focused on molecular momentum transport at gas-solid and liquid-solid interfaces, respectively. Summary and conclusions are finally presented in Section 4. PMID:20087458

A MEMS-based super fast dew point hygrometer—construction and medical applications

NASA Astrophysics Data System (ADS)

Jachowicz, Ryszard S.; Weremczuk, Jerzy; Paczesny, Daniel; Tarapata, Grzegorz

2009-12-01

The paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between -10 °C and 40 °C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.

Design and fabrication of light weight current collectors for direct methanol fuel cells using the micro-electro mechanical system technique

NASA Astrophysics Data System (ADS)

Sung, Min-Feng; Kuan, Yean-Der; Chen, Bing-Xian; Lee, Shi-Min

The direct methanol fuel cell (DMFC) is suitable for portable applications. Therefore, a light weight and small size is desirable. The main objective of this paper is to design and fabricate a light weight current collector for DMFC usage. The light weight current collector mainly consists of a substrate with two thin film metal layers. The substrate of the current collector is an FR4 epoxy plate. The thin film metal layers are accomplished by the thermo coater technique to coat metal powders onto the substrate surfaces. The developed light weight current collectors are further assembled to a single cell DMFC test fixture to measure the cell performance. The results show that the proposed current collectors could even be applied to DMFCs because they are light, thin and low cost and have potential for mass production.

Predicting the random drift of MEMS gyroscope based on K-means clustering and OLS RBF Neural Network

NASA Astrophysics Data System (ADS)

Wang, Zhen-yu; Zhang, Li-jie

2017-10-01

Measure error of the sensor can be effectively compensated with prediction. Aiming at large random drift error of MEMS(Micro Electro Mechanical System))gyroscope, an improved learning algorithm of Radial Basis Function(RBF) Neural Network(NN) based on K-means clustering and Orthogonal Least-Squares (OLS) is proposed in this paper. The algorithm selects the typical samples as the initial cluster centers of RBF NN firstly, candidates centers with K-means algorithm secondly, and optimizes the candidate centers with OLS algorithm thirdly, which makes the network structure simpler and makes the prediction performance better. Experimental results show that the proposed K-means clustering OLS learning algorithm can predict the random drift of MEMS gyroscope effectively, the prediction error of which is 9.8019e-007°/s and the prediction time of which is 2.4169e-006s