Shape control of Co3O4 micro-structures for high-performance gas sensor

NASA Astrophysics Data System (ADS)

Zhou, Qu; Zeng, Wen

2018-01-01

Recently, spinel cobalt oxide (Co3O4) structure has been widely investigated due to its excellent sensitivity towards various noxious gases and good response/recovery speed at low concentration. In this work, we designed and synthesized two kinds of different Co3O4 micro-structure (cube and octahedron) with a similar size. After fabricating them into gas sensors, we found that the crystal plane structure of Co3O4 has an important effect on its gas sensing performance. Furthermore, the {111} planes of Co3O4may be more sensitive than {100} planes to various testing gases. Co3O4 octahedrons micro-structure exhibits an excellent sensitivity (about 12.6), good response/recovery speed and cycling stability (no decline even after 2 days) under 50 ppm ethanol gases at working temperature of 200 °C. As such, thisCo3O4 octahedrons micro-structure is a promising candidate for a high-performance gas sensing material.

A Micro-Computed Tomography Technique to Study the Quality of Fibre Optics Embedded in Composite Materials

PubMed Central

Chiesura, Gabriele; Luyckx, Geert; Voet, Eli; Lammens, Nicolas; Van Paepegem, Wim; Degrieck, Joris; Dierick, Manuel; Van Hoorebeke, Luc; Vanderniepen, Pieter; Sulejmani, Sanne; Sonnenfeld, Camille; Geernaert, Thomas; Berghmans, Francis

2015-01-01

Quality of embedment of optical fibre sensors in carbon fibre-reinforced polymers plays an important role in the resultant properties of the composite, as well as for the correct monitoring of the structure. Therefore, availability of a tool able to check the optical fibre sensor-composite interaction becomes essential. High-resolution 3D X-ray Micro-Computed Tomography, or Micro-CT, is a relatively new non-destructive inspection technique which enables investigations of the internal structure of a sample without actually compromising its integrity. In this work the feasibility of inspecting the position, the orientation and, more generally, the quality of the embedment of an optical fibre sensor in a carbon fibre reinforced laminate at unit cell level have been proven. PMID:25961383

A feasibility study on embedded micro-electromechanical sensors and systems (MEMS) for monitoring highway structures.

DOT National Transportation Integrated Search

2011-06-01

Micro-electromechanical systems (MEMS) provide vast improvements over existing sensing methods in the context of structural health monitoring (SHM) of highway infrastructure systems, including improved system reliability, improved longevity and enhan...

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique.

PubMed

Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

2015-10-23

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

PubMed Central

Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

2015-01-01

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. PMID:26512671

Solar micro-power system for self-powered wireless sensor nodes

NASA Astrophysics Data System (ADS)

He, Yongtai; Li, Yangqiu; Liu, Lihui; Wang, Lei

2008-10-01

In self-powered wireless sensor nodes, the efficiency for environmental energy harvesting, storage and management determines the lifetime and environmental adaptability of the sensor nodes. However, the method of improving output efficiency for traditional photovoltaic power generation is not suitable for a solar micro-power system due to the special requirements for its application. This paper presents a solar micro-power system designed for a solar self-powered wireless sensor node. The Maximum Power Point Tracking (MPPT) of solar cells and energy storage are realized by the hybrid energy storage structure and "window" control. Meanwhile, the mathematical model of energy harvesting, storing and management is formulated. In the novel system, the output conversion efficiency of solar cells is 12%.

A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates

PubMed Central

Xu, Lizhong

2018-01-01

In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively. PMID:29373546

A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates.

PubMed

Fu, Xiaorui; Xu, Lizhong

2018-01-26

In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively.

An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

PubMed Central

Park, Dong-Sam; Yun, Dae-Jin; Cho, Myeong-Woo; Shin, Bong-Cheol

2007-01-01

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method.

Functional micro/nanostructures: simple synthesis and application in sensors, fuel cells, and gene delivery.

PubMed

Guo, Shaojun; Wang, Erkang

2011-07-19

In order to develop new, high technology devices for a variety of applications, researchers would like to better control the structure and function of micro/nanomaterials through an understanding of the role of size, shape, architecture, composition, hybridization, molecular engineering, assembly, and microstructure. However, researchers continue to face great challenges in the construction of well-defined micro/nanomaterials with diverse morphologies. At the same time, the research interface where micro/nanomaterials meet electrochemistry, analytical chemistry, biomedicine, and other fields provides rich opportunities to reveal new chemical, physical, and biological properties of micro/nanomaterials and to uncover many new functions and applications of these materials. In this Account, we describe our recent progress in the construction of novel inorganic and polymer nanostructures formed through different simple strategies. Our synthetic strategies include wet-chemical and electrochemical methods for the controlled production of inorganic and polymer nanomaterials with well-defined morphologies. These methods are both facile and reliable, allowing us to produce high-quality micro/nanostructures, such as nanoplates, micro/nanoflowers, monodisperse micro/nanoparticles, nanowires, nanobelts, and polyhedron and even diverse hybrid structures. We implemented a series of approaches to address the challenges in the preparation of new functional micro/nanomaterials for a variety of important applications This Account also highlights new or enhanced applications of certain micro/nanomaterials in sensing applications. We singled out analytical techniques that take advantage of particular properties of micro/nanomaterials. Then by rationally tailoring experimental parameters, we readily and selectively obtained different types of micro/nanomaterials with novel morphologies with high performance in applications such as electrochemical sensors, electrochemiluminescent sensors, gene delivery agents, and fuel cell catalysts. We expect that micro/nanomaterials with unique structural characteristics, properties, and functions will attract increasing research interest and will lead to new opportunities in various fields of research.

High-efficiency integrated piezoelectric energy harvesting systems

NASA Astrophysics Data System (ADS)

Hande, Abhiman; Shah, Pradeep

2010-04-01

This paper describes hierarchically architectured development of an energy harvesting (EH) system that consists of micro and/or macro-scale harvesters matched to multiple components of remote wireless sensor and communication nodes. The micro-scale harvesters consist of thin-film MEMS piezoelectric cantilever arrays and power generation modules in IC-like form to allow efficient EH from vibrations. The design uses new high conversion efficiency thin-film processes combined with novel cantilever structures tuned to multiple resonant frequencies as broadband arrays. The macro-scale harvesters are used to power the collector nodes that have higher power specifications. These bulk harvesters can be integrated with efficient adaptive power management circuits that match transducer impedance and maximize power harvested from multiple scavenging sources with very low intrinsic power consumption. Texas MicroPower, Inc. is developing process based on a composition that has the highest reported energy density as compared to other commercially available bulk PZT-based sensor/actuator ceramic materials and extending it to thin-film materials and miniature conversion transducer structures. The multiform factor harvesters can be deployed for several military and commercial applications such as underground unattended sensors, sensors in oil rigs, structural health monitoring, supply chain management, and battlefield applications such as sensors on soldier apparel, equipment, and wearable electronics.

Fiber-optical sensor with intensity compensation model in college teaching of physics experiment

NASA Astrophysics Data System (ADS)

Su, Liping; Zhang, Yang; Li, Kun; Zhang, Yu

2017-08-01

Optical fiber sensor technology is one of the main contents of modern information technology, which has a very important position in modern science and technology. Fiber optic sensor experiment can improve students' enthusiasm and broaden their horizons in college physics experiment. In this paper the main structure and working principle of fiberoptical sensor with intensity compensation model are introduced. And thus fiber-optical sensor with intensity compensation model is applied to measure micro displacement of Young's modulus measurement experiment and metal linear expansion coefficient measurement experiment in the college physics experiment. Results indicate that the measurement accuracy of micro displacement is higher than that of the traditional methods using fiber-optical sensor with intensity compensation model. Meanwhile this measurement method makes the students understand on the optical fiber, sensor and nature of micro displacement measurement method and makes each experiment strengthen relationship and compatibility, which provides a new idea for the reform of experimental teaching.

CO Sensing Performance of a Micro Thermoelectric Gas Sensor with AuPtPd/SnO2 Catalyst and Effects of a Double Catalyst Structure with Pt/α-Al2O3

PubMed Central

Goto, Tomoyo; Itoh, Toshio; Akamatsu, Takafumi; Shin, Woosuck

2015-01-01

The CO sensing properties of a micro thermoelectric gas sensor (micro-TGS) with a double AuPtPd/SnO2 and Pt/α-Al2O3 catalyst were investigated. While several nanometer sized Pt and Pd particles were uniformly dispersed on SnO2, the Au particles were aggregated as particles measuring >10 nm in diameter. In situ diffuse reflectance Fourier transform Infrared spectroscopy (DRIFT) analysis of the catalyst showed a CO adsorption peak on Pt and Pd, but no clear peak corresponding to the interaction between CO and Au was detected. Up to 200 °C, CO combustion was more temperature dependent than that of H2, while H2 combustion was activated by repeated exposure to H2 gas during the periodic gas test. Selective CO sensing of the micro-TGS against H2 was attempted using a double catalyst structure with 0.3–30 wt% Pt/α-Al2O3 as a counterpart combustion catalyst. The sensor output of the micro-TGS decreased with increasing Pt content in the Pt/α-Al2O3 catalyst, by cancelling out the combustion heat from the AuPtPd/SnO2 catalyst. In addition, the AuPtPd/SnO2 and 0.3 wt% Pt/α-Al2O3 double catalyst sensor showed good and selective CO detection. We therefore demonstrated that our micro-TGS with double catalyst structure is useful for controlling the gas selectivity of CO against H2. PMID:26694397

Electrochemical micro sensor

DOEpatents

Setter, Joseph R.; Maclay, G. Jordan

1989-09-12

A micro-amperometric electrochemical sensor for detecting the presence of a pre-determined species in a fluid material is disclosed. The sensor includes a smooth substrate having a thin coating of solid electrolytic material deposited thereon. The working and counter electrodes are deposited on the surface of the solid electrolytic material and adhere thereto. Electrical leads connect the working and counter electrodes to a potential source and an apparatus for measuring the change in an electrical signal caused by the electrochemical oxidation or reduction of the species. Alternatively, the sensor may be fabricated in a sandwich structure and also may be cylindrical, spherical or other shapes.

Cost-effective optical fiber pressure sensor based on intrinsic Fabry-Perot interferometric micro-cavities

NASA Astrophysics Data System (ADS)

Domingues, M. Fátima; Rodriguez, Camilo A.; Martins, Joana; Tavares, Cátia; Marques, Carlos; Alberto, Nélia; André, Paulo; Antunes, Paulo

2018-05-01

In this work, a cost-effective procedure to manufacture optical fiber pressure sensors is presented. This has a high relevance for integration in robotic exoskeletons or for gait plantar pressure monitoring within the physical rehabilitation scenarios, among other applications. The sensing elements are based on Fabry-Perot interferometric (FPI) micro-cavities, created from the recycling of optical fibers previously destroyed by the catastrophic fuse effect. To produce the pressure sensors, the fiber containing the FPI micro-cavities was embedded in an epoxy resin cylinder used as pressure transducer and responsible to transfer the pressure applied on its surface to the optical fiber containing the FPI micro-cavity. Before the embedding process, some FPI sensors were also characterized to strain variations. After that, the effect of the encapsulation of the FPI structure into the resin was assessed, from which a slight decrease on the FPI interferogram fringes visibility was verified, indicating a small increase in the micro-cavity length. Up on the sensors characterization, a linear dependence of the wavelength shift with the induced pressure was obtained, which leads to a maximum sensitivity of 59.39 ± 1.7 pm/kPa. Moreover, direct dependence of the pressure sensitivity with the micro-cavity volume and length was found.

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS).

PubMed

Tian, Bian; Zhao, Yulong; Jiang, Zhuangde; Zhang, Ling; Liao, Nansheng; Liu, Yuanhao; Meng, Chao

2009-01-01

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy.

The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

PubMed Central

Meng, Xiawei; Zhao, Yulong

2016-01-01

A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzing the stress distribution of sensitive elements using the finite element method, a novel structure incorporating sensitive beams with a traditional bossed diaphragm is built up. The proposed structure proved to be advantageous in terms of high sensitivity and high overload resistance compared with the conventional bossed diaphragm and flat diaphragm structures. Curve fittings of surface stress and deflection based on ANSYS simulation results are performed to establish the sensor equations. Fabricated on an n-type single crystal silicon wafer, the sensor chips are wire-bonded to a printed circuit board (PCB) and packaged for experiments. The static and dynamic characteristics are tested and discussed. Experimental results show that the sensor has a sensitivity as high as 17.339 μV/V/Pa in the range of 500 Pa at room temperature, and a high overload resistance of 200 times overpressure. Due to the excellent performance, the sensor can be applied in measuring micro-pressure lower than 500 Pa. PMID:27005627

Application of Micro-Electro-Mechanical Sensors Contactless NDT of Concrete Structures.

PubMed

Ham, Suyun; Popovics, John S

2015-04-17

The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ultrasonic surface wave, and multi-channel analysis of surface waves (MASW), is demonstrated. In each test application, the performance of MEMS is compared with conventional contactless and contact sensing technology. Favorable performance of the MEMS sensors demonstrates the potential of the technology for applied contactless NDT efforts. To illustrate the utility of air-coupled MEMS sensors for concrete NDT, as compared with conventional sensor technology.

Fiber Optic Sensor Embedment Study for Multi-Parameter Strain Sensing

PubMed Central

Drissi-Habti, Monssef; Raman, Venkadesh; Khadour, Aghiad; Timorian, Safiullah

2017-01-01

The fiber optic sensors (FOSs) are commonly used for large-scale structure monitoring systems for their small size, noise free and low electrical risk characteristics. Embedded fiber optic sensors (FOSs) lead to micro-damage in composite structures. This damage generation threshold is based on the coating material of the FOSs and their diameter. In addition, embedded FOSs are aligned parallel to reinforcement fibers to avoid micro-damage creation. This linear positioning of distributed FOS fails to provide all strain parameters. We suggest novel sinusoidal sensor positioning to overcome this issue. This method tends to provide multi-parameter strains in a large surface area. The effectiveness of sinusoidal FOS positioning over linear FOS positioning is studied under both numerical and experimental methods. This study proves the advantages of the sinusoidal positioning method for FOS in composite material’s bonding. PMID:28333117

Fabrication and Structural Design of Micro Pressure Sensors for Tire Pressure Measurement Systems (TPMS)

PubMed Central

Tian, Bian; Zhao, Yulong; Jiang, Zhuangde; Zhang, Ling; Liao, Nansheng; Liu, Yuanhao; Meng, Chao

2009-01-01

In this paper we describe the design and testing of a micro piezoresistive pressure sensor for a Tire Pressure Measurement System (TPMS) which has the advantages of a minimized structure, high sensitivity, linearity and accuracy. Through analysis of the stress distribution of the diaphragm using the ANSYS software, a model of the structure was established. The fabrication on a single silicon substrate utilizes the technologies of anisotropic chemical etching and packaging through glass anodic bonding. The performance of this type of piezoresistive sensor, including size, sensitivity, and long-term stability, were investigated. The results indicate that the accuracy is 0.5% FS, therefore this design meets the requirements for a TPMS, and not only has a smaller size and simplicity of preparation, but also has high sensitivity and accuracy. PMID:22573960

Open Loop Structure Low Cost Integrated Differential Inductive Micro Magnetic Volumetric Bio-Sensors

NASA Astrophysics Data System (ADS)

Khodadadi, Mohammad; Chang, Long; Litvinov, Dimitri

This investigation proposes a study, model, simulate and experiment innovative very low cost Magnetic induction biosensor for point of care diagnostics. The biosensor consists of 2 ``semi-loops'' in a micro fluidic channel, one as a sensor and one as a reference, the design takes advantage of microfabrication processes to produce more precise structures to improve sensitivity. Besides the attractively low cost, this biosensor has many advantages. Since the detector is basically a shaped wire, it is inherently robust and reliable. Typical errors in fabricating the wires will not affect its performance and it is sensing volumetric, unlike GMR-based sensors used in biosensor systems that boast single particle detection. Due to small dimensions the sensors do not need to be calibrated. This sensor also has a large range of detection since its sensitivity is proportional to the excitation frequency. Being able to sense Magnetic nano particles in the volume is an advantage in term of trapping MNPs and sensitivity and functionality. Basically, this new brilliant design, fill the gap between the fabricated sensors and hand wounded sensors.

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

PubMed Central

Chen, Jiawen; Li, Jianhua; Li, Yiyuan; Chen, Yulong

2018-01-01

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. PMID:29494477

Quantitative Diagnostics of Multilayered Composite Structures with Ultrasonic Guided Waves

DTIC Science & Technology

2014-09-01

sensors. These IDT sensors were fabricated from thin wafer of piezoelectric lead zirconate titanate ( PZT ) substrates by using a pulse laser micro...pavement structures," J. Acoust. Soc. Am., vol. 116, no. 5, pp. 2902-2913, 2004. [9] E. Kostson and P. Fromme, " Fatigue crack growth monitoring in multi

Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

PubMed Central

Contreras, Javier; Costa, Daniel; Pereira, Sonia; Fortunato, Elvira; Martins, Rodrigo; Wierzbicki, Rafal; Heerlein, Holger; Ferreira, Isabel

2010-01-01

The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 μm wide by 400 μm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 μm along the lateral dimension of the sensor as well as of less than 3 μm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 μm when detecting the holding structure. PMID:22163648

High-Frequency Fiber-Optic Ultrasonic Sensor Using Air Micro-Bubble for Imaging of Seismic Physical Models.

PubMed

Gang, Tingting; Hu, Manli; Rong, Qiangzhou; Qiao, Xueguang; Liang, Lei; Liu, Nan; Tong, Rongxin; Liu, Xiaobo; Bian, Ce

2016-12-14

A micro-fiber-optic Fabry-Perot interferometer (FPI) is proposed and demonstrated experimentally for ultrasonic imaging of seismic physical models. The device consists of a micro-bubble followed by the end of a single-mode fiber (SMF). The micro-structure is formed by the discharging operation on a short segment of hollow-core fiber (HCF) that is spliced to the SMF. This micro FPI is sensitive to ultrasonic waves (UWs), especially to the high-frequency (up to 10 MHz) UW, thanks to its ultra-thin cavity wall and micro-diameter. A side-band filter technology is employed for the UW interrogation, and then the high signal-to-noise ratio (SNR) UW signal is achieved. Eventually the sensor is used for lateral imaging of the physical model by scanning UW detection and two-dimensional signal reconstruction.

A Micro Aerosol Sensor for the Measurement of Airborne Ultrafine Particles.

PubMed

Zhang, Chao; Zhu, Rong; Yang, Wenming

2016-03-18

Particle number concentration and particle size are the two key parameters used to characterize exposure to airborne nanoparticles or ultrafine particles that have attracted the most attention. This paper proposes a simple micro aerosol sensor for detecting the number concentration and particle size of ultrafine particles with diameters from 50 to 253 nm based on electrical diffusion charging. The sensor is composed of a micro channel and a couple of planar electrodes printed on two circuit boards assembled in parallel, which thus integrate charging, precipitating and measurement elements into one chip, the overall size of which is 98 × 38 × 25 mm³. The experiment results demonstrate that the sensor is useful for measuring monodisperse aerosol particles with number concentrations from 300 to 2.5 × 10⁴ /cm³ and particle sizes from 50 to 253 nm. The aerosol sensor has a simple structure and small size, which is favorable for use in handheld devices.

A Micro Aerosol Sensor for the Measurement of Airborne Ultrafine Particles

PubMed Central

Zhang, Chao; Zhu, Rong; Yang, Wenming

2016-01-01

Particle number concentration and particle size are the two key parameters used to characterize exposure to airborne nanoparticles or ultrafine particles that have attracted the most attention. This paper proposes a simple micro aerosol sensor for detecting the number concentration and particle size of ultrafine particles with diameters from 50 to 253 nm based on electrical diffusion charging. The sensor is composed of a micro channel and a couple of planar electrodes printed on two circuit boards assembled in parallel, which thus integrate charging, precipitating and measurement elements into one chip, the overall size of which is 98 × 38 × 25 mm3. The experiment results demonstrate that the sensor is useful for measuring monodisperse aerosol particles with number concentrations from 300 to 2.5 × 104 /cm3 and particle sizes from 50 to 253 nm. The aerosol sensor has a simple structure and small size, which is favorable for use in handheld devices. PMID:26999156

Development of compact slip detection sensor using dielectric elastomer

NASA Astrophysics Data System (ADS)

Choi, Jae-young; Hwang, Do-Yeon; Kim, Baek-chul; Moon, Hyungpil; Choi, Hyouk Ryeol; Koo, Ja Choon

2015-04-01

In this paper, we developed a resistance tactile sensor that can detect a slip on the surface of sensor structure. The presented sensor device has fingerprint-like structures that are similar with the role of the humans finger print. The resistance slip sensor that the novel developed uses acrylo-nitrile butadiene rubber (NBR) as a dielectric substrate and graphene as an electrode material. We can measure the slip as the structure of sensor makes a deformation and it changes the resistance through forming a new conductive route. To manufacture our sensor, we developed a new imprint process. By using this process, we can produce sensor with micro unit structure. To verify effectiveness of the proposed slip detection, experiment using prototype of resistance slip sensor is conducted with an algorithm to detect slip and slip is successfully detected. We will discuss the slip detection properties.

A comparative study of MOEM pressure sensors using MZI, DC, and racetrack resonator IO structures

NASA Astrophysics Data System (ADS)

Selvarajan, A.; Pattnaik, Prasant Kumar; Badrinarayana, T.; Srinivas, T.

2006-03-01

In recent years micro-electro-mechanical system (MEMS) sensors have drawn considerable attention due to their attraction in terms of miniaturization, batch fabrication and ease of integration with the required electronics circuitry. Micro-opto-electro-mechanical (MOEM) devices and systems, based on the principles of integrated optics and micromachining technology on silicon have immense potential for sensor applications. Employing optical techniques have important advantages such as functionality, large bandwidth and higher sensitivity. Pressure sensing is currently the most lucrative market for solid-state micro sensors. Pressure sensing using micromachined structures utilize the changes induced in either the resistive or capacitive properties of the electro-mechanical structure by the impressed pressure. Integrated optical pressure sensors can utilize the changes to the amplitude, phase, refractive index profile, optical path length, or polarization of the lightwave by the external pressure. In this paper we compare the performance characteristics of three types of MOEM pressure sensors based on Mach-Zehnder Interferometer (MZI), Directional Coupler (DC) and racetrack resonator (RR) integrated optical geometries. The first two configurations measure the pressure changes through a change in optical intensity while the third one measures the same in terms of frequency or wavelength change. The analysis of each sensors has been carried out in terms of mechanical and optical models and their interrelationship through optomechanical coupling. For a typical diaphragm of size 2mm × 1mm × 20 μm, normalized pressure sensitivity of 18.35 μW/mW/kPa, 29.37 μW/mW/kPa and 2.26 pm/kPa in case of MZI, DC and RR devices have been obtained respectively. The noise performance of these devices are also presented.

Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

NASA Astrophysics Data System (ADS)

Jiang, Shulan; Shi, Tielin; Zhan, Xiaobin; Xi, Shuang; Long, Hu; Gong, Bo; Li, Junjie; Cheng, Siyi; Huang, Yuanyuan; Tang, Zirong

2015-11-01

The carbon-based micro/nano electromechanical system (MEMS/NEMS) technique provides a powerful approach to large-scale manufacture of high-aspect-ratio carbon structures for wafer-level processing. The fabricated three-dimensional (3D) carbon structures have the advantages of excellent electrical and electrochemical properties, and superior biocompatibility. In order to improve their performance for applications in micro energy storage devices and microsensors, an increase in the footprint surface area is of great importance. Various approaches have been proposed for fabricating large surface area carbon-based structures, including the integration of nanostructures such as carbon nanotubes (CNTs), graphene, nanowires, nanofilms and nanowrinkles onto 3D structures, which has been proved to be effective and productive. Moreover, by etching the 3D photoresist microstructures through oxygen plasma or modifying the photoresist with specific materials which can be etched in the following pyrolysis process, micro/nano hierarchical carbon structures have been fabricated. These improved structures show excellent performance in various applications, especially in the fields of biological sensors, surface-enhanced Raman scattering, and energy storage devices such as micro-supercapacitors and fuel cells. With the rapid development of microelectronic devices, the carbon-based MEMS/NEMS technique could make more aggressive moves into microelectronics, sensors, miniaturized power systems, etc. In this review, the recent advances in the fabrication of micro/nano hierarchical carbon-based structures are introduced and the technical challenges and future outlook of the carbon-based MEMS/NEMS techniques are also analyzed.

A finger-free wrist-worn pulse oximeter for the monitoring of chronic obstructive pulmonary disease

NASA Astrophysics Data System (ADS)

Chu, Chang-Sheng; Chuang, Shuang-Chao; Lee, Yeh Wen; Fan, Chih-Hsun; Chung, Lung Pin; Li, Yu-Tang; Chen, Jyh-Chern

2016-03-01

Herein, a finger-free wrist-worn pulse oximeter is presented. This device allows patients to measure blood oxygen level and pulse rate without hindering their normal finger movement. This wrist-worn pulse oximeter is built with a reflectance oximetry sensor, which consists of light emitting diodes and photodiode light detectors located side by side. This reflectance oximetry sensor is covered with an optical element with micro structured surface. This micro structured optical element is designed to modulate photon propagation beneath the skin tissue so that the photoplethysmogram signals of reflected lights or backscattered lights detected by the photodetector are therefore enhanced.

Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Lin, Chien-Hen; Lo, Yi-Man

2011-01-01

Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance. PMID:22163817

NASA NDE Applications for Mobile MEMS Devices and Sensors

NASA Technical Reports Server (NTRS)

Wilson, William C.; Atkinson, Gary M.; Barclay, R. O.

2008-01-01

NASA would like new devices and sensors for performing nondestructive evaluation (NDE) of aerospace vehicles. These devices must be small in size/volume, mass, and power consumption. The devices must be autonomous and mobile so they can access the internal structures of aircraft and spacecraft and adequately monitor the structural health of these craft. The platforms must be mobile in order to transport NDE sensors for evaluating structural integrity and determining whether further investigations will be required. Microelectromechanical systems (MEMS) technology is crucial to the development of the mobile platforms and sensor systems. This paper presents NASA s needs for micro mobile platforms and MEMS sensors that will enable NDE to be performed on aerospace vehicles.

Micro- and nano-NDE systems for aircraft: great things in small packages

NASA Astrophysics Data System (ADS)

Malas, James C.; Kropas-Hughes, Claudia V.; Blackshire, James L.; Moran, Thomas; Peeler, Deborah; Frazier, W. G.; Parker, Danny

2003-07-01

Recent advancements in small, microscopic NDE sensor technologies will revolutionize how aircraft maintenance is done, and will significantly improve the reliability and airworthiness of current and future aircraft systems. A variety of micro/nano systems and concepts are being developed that will enable whole new capabilities for detecting and tracking structural integrity damage. For aging aircraft systems, the impact of micro-NDE sensor technologies will be felt immediately, with dramatic reductions in labor for maintenance, and extended useable life of critical components being two of the primary benefits. For the fleet management of future aircraft systems, a comprehensive evaluation and tracking of vehicle health throughout its entire life cycle will be needed. Indeed, micro/nano NDE systems will be instrumental in realizing this futuristic vision. Several major challenges will need to be addressed, however, before micro- and nano-NDE systems can effectively be implemented, and this will require interdisciplinary research approaches, and a systematic engineering integration of the new technologies into real systems. Future research will need to emphasize systems engineering approaches for designing materials and structures with in-situ inspection and prognostic capabilities. Recent advances in 1) embedded / add-on micro-sensors, 2) computer modeling of nondestructive evaluation responses, and 3) wireless communications are important steps toward this goal, and will ultimately provide previously unimagined opportunities for realizing whole new integrated vehicle health monitoring capabilities. The future use of micro/nano NDE technologies as vehicle health monitoring tools will have profound implications, and will provide a revolutionary way of doing NDE in the near and distant future.

Design and analysis of photonic crystal micro-cavity based optical sensor platform

DOE Office of Scientific and Technical Information (OSTI.GOV)

Goyal, Amit Kumar, E-mail: amitgoyal.ceeri@gmail.com; Dutta, Hemant Sankar, E-mail: hemantdutta97@gmail.com; Pal, Suchandan, E-mail: spal@ceeri.ernet.in

2016-04-13

In this paper, the design of a two-dimensional photonic crystal micro-cavity based integrated-optic sensor platform is proposed. The behaviour of designed cavity is analyzed using two-dimensional Finite Difference Time Domain (FDTD) method. The structure is designed by deliberately inserting some defects in a photonic crystal waveguide structure. Proposed structure shows a quality factor (Q) of about 1e5 and the average sensitivity of 500nm/RIU in the wavelength range of 1450 – 1580 nm. Sensing technique is based on the detection of shift in upper-edge cut-off wavelength for a reference signal strength of –10 dB in accordance with the change in refractive index ofmore » analyte.« less

Optimization of PZT ceramic IDT sensors for health monitoring of structures.

PubMed

Takpara, Rafatou; Duquennoy, Marc; Ouaftouh, Mohammadi; Courtois, Christian; Jenot, Frédéric; Rguiti, Mohamed

2017-08-01

Surface acoustic waves (SAW) are particularly suited to effectively monitoring and characterizing structural surfaces (condition of the surface, coating, thin layer, micro-cracks…) as their energy is localized on the surface, within approximately one wavelength. Conventionally, in non-destructive testing, wedge sensors are used to the generation guided waves but they are especially suited to flat surfaces and sized for a given type material (angle of refraction). Additionally, these sensors are quite expensive so it is quite difficult to leave the sensors permanently on the structure for its health monitoring. Therefore we are considering in this study, another type of ultrasonic sensors, able to generate SAW. These sensors are interdigital sensors or IDT sensors for InterDigital Transducer. This paper focuses on optimization of IDT sensors for non-destructive structural testing by using PZT ceramics. The challenge was to optimize the dimensional parameters of the IDT sensors in order to efficiently generate surface waves. Acoustic tests then confirmed these parameters. Copyright © 2017 Elsevier B.V. All rights reserved.

Application of Flexible Micro Temperature Sensor in Oxidative Steam Reforming by a Methanol Micro Reformer

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Shen, Chia-Chieh; Yeh, Chuin-Tih; Chang, Chi-Chung; Lo, Yi-Man

2011-01-01

Advances in fuel cell applications reflect the ability of reformers to produce hydrogen. This work presents a flexible micro temperature sensor that is fabricated based on micro-electro-mechanical systems (MEMS) technology and integrated into a flat micro methanol reformer to observe the conditions inside that reformer. The micro temperature sensor has higher accuracy and sensitivity than a conventionally adopted thermocouple. Despite various micro temperature sensor applications, integrated micro reformers are still relatively new. This work proposes a novel method for integrating micro methanol reformers and micro temperature sensors, subsequently increasing the methanol conversion rate and the hydrogen production rate by varying the fuel supply rate and the water/methanol ratio. Importantly, the proposed micro temperature sensor adequately controls the interior temperature during oxidative steam reforming of methanol (OSRM), with the relevant parameters optimized as well. PMID:22319407

Photonic Low Cost Micro-Sensor for in-Line Wear Particle Detection in Flowing Lube Oils.

PubMed

Mabe, Jon; Zubia, Joseba; Gorritxategi, Eneko

2017-03-14

The presence of microscopic particles in suspension in industrial fluids is often an early warning of latent or imminent failures in the equipment or processes where they are being used. This manuscript describes work undertaken to integrate different photonic principles with a micro- mechanical fluidic structure and an embedded processor to develop a fully autonomous wear debris sensor for in-line monitoring of industrial fluids. Lens-less microscopy, stroboscopic illumination, a CMOS imager and embedded machine vision technologies have been merged to develop a sensor solution that is able to detect and quantify the number and size of micrometric particles suspended in a continuous flow of a fluid. A laboratory test-bench has been arranged for setting up the configuration of the optical components targeting a static oil sample and then a sensor prototype has been developed for migrating the measurement principles to real conditions in terms of operating pressure and flow rate of the oil. Imaging performance is quantified using micro calibrated samples, as well as by measuring real used lubricated oils. Sampling a large fluid volume with a decent 2D spatial resolution, this photonic micro sensor offers a powerful tool at very low cost and compacted size for in-line wear debris monitoring.

Photonic Low Cost Micro-Sensor for in-Line Wear Particle Detection in Flowing Lube Oils

PubMed Central

Mabe, Jon; Zubia, Joseba; Gorritxategi, Eneko

2017-01-01

The presence of microscopic particles in suspension in industrial fluids is often an early warning of latent or imminent failures in the equipment or processes where they are being used. This manuscript describes work undertaken to integrate different photonic principles with a micro- mechanical fluidic structure and an embedded processor to develop a fully autonomous wear debris sensor for in-line monitoring of industrial fluids. Lens-less microscopy, stroboscopic illumination, a CMOS imager and embedded machine vision technologies have been merged to develop a sensor solution that is able to detect and quantify the number and size of micrometric particles suspended in a continuous flow of a fluid. A laboratory test-bench has been arranged for setting up the configuration of the optical components targeting a static oil sample and then a sensor prototype has been developed for migrating the measurement principles to real conditions in terms of operating pressure and flow rate of the oil. Imaging performance is quantified using micro calibrated samples, as well as by measuring real used lubricated oils. Sampling a large fluid volume with a decent 2D spatial resolution, this photonic micro sensor offers a powerful tool at very low cost and compacted size for in-line wear debris monitoring. PMID:28335436

[Development of Micro-Spectrometer with a Function of Timely Temperature Compensation].

PubMed

Bao, Jian-guang; Liu, Zheng-kun; Chen, Huo-yao; Lin, Ji-ping; Fu, Shao-jun

2015-05-01

Temperature drift will be brought to Micro-Spectrometer used for demodulating the Varied Line-Space(VLS) grating position sensor on aircraft due to high-low temperature shock. We successfully made a Micro-Spectrometer, for the VLS grating position sensor on aircraft, which still have stable output under temperature shock enviro nment. In order to present a real time temperature compensation scheme, the effects temperature change has on Micro-Spectrometer are analyzed and the traditional cross Czerny-Turner (C-T)optical structure is optimized. Both optical structures are analyzed by optics design software ZEMAX and proved that comparedwithtraditional cross C-T optical structure, the newone can accomplish not only smaller spectrum drift but also spectrum drift with better linearity. Based on the new optical structure. The scheme of using reference wavelength to accomplish real time temperature compensation was proposed and a Micro-fiber Spectrometer was successfully manufactured, whith is with Volume of 80 mm X 70 mmX 70 mm, integration time of 8 ~1 000 ms and FullWidthHalfMaximum(FWHM) of 2 nm. Experiments show that the new spectrometer meets the design requirement. Under high temperature in the range of nearly 60 °C, the standard error of wavelength of this new spectrometer is smaller than 0. 1 nm, and the maximum error of wavelength is 0. 14 nm, which is much smaller than required 0. 3 nm. Innovations of this paper are the schemeof real time temperature compensation, the new cross C-T optical structure and a Micro-fiber Spectrometer based on it.

A micro S-shaped optical fiber temperature sensor based on dislocation fiber splice

NASA Astrophysics Data System (ADS)

Yan, Haitao; Li, Pengfei; Zhang, Haojie; Shen, Xiaoyue; Wang, Yongzhen

2017-12-01

We fabricated a simple, compact, and stable temperature sensor based on an S-shaped dislocated optical fiber. The dislocation optical fiber has two splice points, and we obtained the optimal parameters based on the theory and our experiment, such as the dislocation amount and length of the dislocation optical fiber. According to the relationship between the temperature and the peak wavelength shift, the temperature of the environment can be obtained. Then, we made this fiber a micro bending as S-shape between the two dislocation points, and the S-shaped micro bending part could release stress with the change in temperature and reduce the effect of stress on the temperature measurement. This structure could solve the problem of sensor distortion caused by the cross response of temperature and stress. We measured the S-shaped dislocation fiber sensor and the dislocation fiber without S-shape under the same environment and conditions, and the S-shaped dislocation fiber had the advantages of the stable reliability and good linearity.

Spatially distributed modal signals of free shallow membrane shell structronic system

NASA Astrophysics Data System (ADS)

Yue, H. H.; Deng, Z. Q.; Tzou, H. S.

2008-11-01

Based on the smart material and structronics technology, distributed sensor and control of shell structures have been rapidly developed for the last 20 years. This emerging technology has been utilized in aerospace, telecommunication, micro-electromechanical systems and other engineering applications. However, distributed monitoring technique and its resulting global spatially distributed sensing signals of shallow paraboloidal membrane shells are not clearly understood. In this paper, modeling of free flexible paraboloidal shell with spatially distributed sensor, micro-sensing signal characteristics, and location of distributed piezoelectric sensor patches are investigated based on a new set of assumed mode shape functions. Parametric analysis indicates that the signal generation depends on modal membrane strains in the meridional and circumferential directions in which the latter is more significant than the former, when all bending strains vanish in membrane shells. This study provides a modeling and analysis technique for distributed sensors laminated on lightweight paraboloidal flexible structures and identifies critical components and regions that generate significant signals.

Spatial Signal Characteristics of Shallow Paraboloidal Shell Structronic Systems

NASA Astrophysics Data System (ADS)

Yue, H. H.; Deng, Z. Q.; Tzou, H. S.

Based on the smart material and structronics technology, distributed sensor and control of shell structures have been rapidly developed for the last twenty years. This emerging technology has been utilized in aerospace, telecommunication, micro-electromechanical systems and other engineering applications. However, distributed monitoring technique and its resulting global spatially distributed sensing signals of thin flexible membrane shells are not clearly understood. In this paper, modeling of free thin paraboloidal shell with spatially distributed sensor, micro-sensing signal characteristics, and location of distributed piezoelectric sensor patches are investigated based on a new set of assumed mode shape functions. Parametric analysis indicates that the signal generation depends on modal membrane strains in the meridional and circumferential directions in which the latter is more significant than the former, when all bending strains vanish in membrane shells. This study provides a modeling and analysis technique for distributed sensors laminated on lightweight paraboloidal flexible structures and identifies critical components and regions that generate significant signals.

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

PubMed Central

Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao

2010-01-01

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C. PMID:22163459

Polypyrrole porous micro humidity sensor integrated with a ring oscillator circuit on chip.

PubMed

Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao

2010-01-01

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C.

Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications

NASA Technical Reports Server (NTRS)

Bajikar, Sateesh S.; Scott, Michael A.; Adcock, Edward E.

2011-01-01

This miniature or micro-sized semiconductor sensor design provides direct, nonintrusive measurement of skin friction or wall shear stress in fluid flow situations in a two-axis configuration. The sensor is fabricated by microelectromechanical system (MEMS) technology, enabling small size and multiple, low-cost reproductions. The sensors may be fabricated by bonding a sensing element wafer to a fluid-coupling element wafer. Using this layered machine structure provides a truly three-dimensional device.

Hybrid plasmonic waveguide-assisted Metal–Insulator–Metal ring resonator for refractive index sensing

NASA Astrophysics Data System (ADS)

Butt, M. A.; Khonina, S. N.; Kazanskiy, N. L.

2018-05-01

A highly sensitive refractive index sensor based on an integrated hybrid plasmonic waveguide (HPWG) and a Metal-Insulator-Metal (M-I-M) micro-ring resonator is presented. In our design, there are two slot-waveguide-based micro-rings that encircle a gold disc. The outer slot WG is formed by the combination of Silicon-Air-Gold ring and the inner slot-waveguide is formed by Gold ring-Air-Gold disc. The slot-waveguide rings provide an interaction length sufficient to accumulate a detectable wavelength shift. The transmission spectrum and electric field distribution of this sensor structure are simulated using Finite Element Method (FEM). The sensitivity of this micro-ring resonator is achieved at 800 nm/RIU which is about six times higher than that of the conventional Si ring with the same geometry. Our proposed sensor design has a potential to find further applications in biomedical science and nano-photonic circuits.

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

PubMed Central

Dai, Ching-Liang; Chen, Yen-Chi; Wu, Chyan-Chyi; Kuo, Chin-Fu

2010-01-01

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively. PMID:22294897

Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip.

PubMed

Dai, Ching-Liang; Chen, Yen-Chi; Wu, Chyan-Chyi; Kuo, Chin-Fu

2010-01-01

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.

3D capacitive tactile sensor using DRIE micromachining

NASA Astrophysics Data System (ADS)

Chuang, Chiehtang; Chen, Rongshun

2005-07-01

This paper presents a three dimensional micro capacitive tactile sensor that can detect normal and shear forces which is fabricated using deep reactive ion etching (DRIE) bulk silicon micromachining. The tactile sensor consists of a force transmission plate, a symmetric suspension system, and comb electrodes. The sensing character is based on the changes of capacitance between coplanar sense electrodes. High sensitivity is achieved by using the high aspect ratio interdigital electrodes with narrow comb gaps and large overlap areas. The symmetric suspension mechanism of this sensor can easily solve the coupling problem of measurement and increase the stability of the structure. In this paper, the sensor structure is designed, the capacitance variation of the proposed device is theoretically analyzed, and the finite element analysis of mechanical behavior of the structures is performed.

Low-cost fabrication of optical waveguides, interconnects and sensing structures on all-polymer-based thin foils

NASA Astrophysics Data System (ADS)

Rezem, Maher; Kelb, Christian; Günther, Axel; Rahlves, Maik; Reithmeier, Eduard; Roth, Bernhard

2016-03-01

Micro-optical sensors based on optical waveguides are widely used to measure temperature, force and strain but also to detect biological and chemical substances such as explosives or toxins. While optical micro-sensors based on silicon technology require complex and expensive process technologies, a new generation of sensors based completely on polymers offer advantages especially in terms of low-cost and fast production techniques. We have developed a process to integrate micro-optical components such as embedded waveguides and optical interconnects into polymer foils with a thickness well below one millimeter. To enable high throughput production, we employ hot embossing technology, which is capable of reel-to-reel fabrication with a surface roughness in the optical range. For the waveguide fabrication, we used the thermoplastic polymethylmethacrylate (PMMA) as cladding and several optical adhesives as core materials. The waveguides are characterized with respect to refractive indices and propagation losses. We achieved propagation losses are as low as 0.3 dB/cm. Furthermore, we demonstrate coupling structures and their fabrication especially suited to integrate various light sources such as vertical-cavity surface-emitting lasers (VCSEL) and organic light emitting diodes (OLED) into thin polymer foils. Also, we present a concept of an all-polymer and waveguide based deformation sensor based on intensity modulation, which can be fabricated by utilizing our process. For future application, we aim at a low-cost and high-throughput reel-to-reel production process enabling the fabrication of large sensor arrays or disposable single-use sensing structures, which will open optical sensing to a large variety of application fields ranging from medical diagnosis to automotive sensing.

A Quad-Cantilevered Plate micro-sensor for intracranial pressure measurement.

PubMed

Lalkov, Vasko; Qasaimeh, Mohammad A

2017-07-01

This paper proposes a new design for pressure-sensing micro-plate platform to bring higher sensitivity to a pressure sensor based on piezoresistive MEMS sensing mechanism. The proposed design is composed of a suspended plate having four stepped cantilever beams connected to its corners, and thus defined as Quad-Cantilevered Plate (QCP). Finite element analysis was performed to determine the optimal design for sensitivity and structural stability under a range of applied forces. Furthermore, a piezoresistive analysis was performed to calculate sensor sensitivity. Both the maximum stress and the change in resistance of the piezoresistor associated with the QCP were found to be higher compared to previously published designs, and linearly related to the applied pressure as desired. Therefore, the QCP demonstrates greater sensitivity, and could be potentially used as an efficient pressure sensor for intracranial pressure measurement.

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS).

PubMed

Pramanick, Bidhan; Martinez-Chapa, Sergio O; Madou, Marc; Hwang, Hyundoo

2017-06-17

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long and hollow glassy carbon microfibers derived from human hairs is introduced. The long and hollow carbon structures were made by the pyrolysis of human hair at 900 °C in a N2 atmosphere. The morphology and chemical composition of natural and pyrolyzed human hairs were investigated using scanning electron microscopy (SEM) and electron-dispersive X-ray spectroscopy (EDX), respectively, to estimate the physical and chemical changes due to pyrolysis. Raman spectroscopy was used to confirm the glassy nature of the carbon microstructures. Pyrolyzed hair carbon was introduced to modify screen-printed carbon electrodes ; the modified electrodes were then applied to the electrochemical sensing of dopamine and ascorbic acid. Sensing performance of the modified sensors was improved as compared to the unmodified sensors. To obtain the desired carbon structure design, carbon micro-/nanoelectromechanical system (C-MEMS/C-NEMS) technology was developed. The most common C-MEMS/C-NEMS fabrication process consists of two steps: (i) the patterning of a carbon-rich base material, such as a photosensitive polymer, using photolithography; and (ii) carbonization through the pyrolysis of the patterned polymer in an oxygen-free environment. The C-MEMS/NEMS process has been widely used to develop microelectronic devices for various applications, including in micro-batteries, supercapacitors, glucose sensors, gas sensors, fuel cells, and triboelectric nanogenerators. Here, recent developments of a high-aspect ratio solid and hollow carbon microstructures with SU8 photoresists are discussed. The structural shrinkage during pyrolysis was investigated using confocal microscopy and SEM. Raman spectroscopy was used to confirm the crystallinity of the structure, and the atomic percentage of the elements present in the material before and after pyrolysis was measured using EDX.

High-Performance electronics at ultra-low power consumption for space applications: From superconductor to nanoscale semiconductor technology

NASA Technical Reports Server (NTRS)

Duncan, Robert V.; Simmons, Jerry; Kupferman, Stuart; McWhorter, Paul; Dunlap, David; Kovanis, V.

1995-01-01

A detailed review of Sandia's work in ultralow power dissipation electronics for space flight applications, including superconductive electronics, new advances in quantum well structures, and ultra-high purity 3-5 materials, and recent advances in micro-electro-optical-mechanical systems (MEMS) is presented. The superconductive electronics and micromechanical devices are well suited for application in micro-robotics, micro-rocket engines, and advanced sensors.

Fast-Response, Sensitivitive and Low-Powered Chemosensors by Fusing Nanostructured Porous Thin Film and IDEs-Microheater Chip

PubMed Central

Dai, Zhengfei; Xu, Lei; Duan, Guotao; Li, Tie; Zhang, Hongwen; Li, Yue; Wang, Yi; Wang, Yuelin; Cai, Weiping

2013-01-01

The chemiresistive thin film gas sensors with fast response, high sensitivity, low power consumption and mass-produced potency, have been expected for practical application. It requires both sensitive materials, especially exquisite nanomaterials, and efficient substrate chip for heating and electrical addressing. However, it is challenging to achieve repeatable microstructures across the films and low power consumption of substrate chip. Here we presented a new sensor structure via the fusion of metal-oxide nanoporous films and micro-electro-mechanical systems (MEMS)-based sensing chip. An interdigital-electrodes (IDEs) and microheater integrated MEMS structure is designed and employed as substrate chip to in-situ fabricate colloidal monolayer template-induced metal-oxide (egg. SnO2) nanoporous sensing films. This fused sensor demonstrates mW-level low power, ultrafast response (~1 s), and parts-per-billion lever detection for ethanol gas. Due to the controllable template strategy and mass-production potential, such micro/nano fused high-performance gas sensors will be next-generation key miniaturized/integrated devices for advanced practical applications. PMID:23591580

Development of micro-heaters with optimized temperature compensation design for gas sensors.

PubMed

Hwang, Woo-Jin; Shin, Kyu-Sik; Roh, Ji-Hyoung; Lee, Dae-Sung; Choa, Sung-Hoon

2011-01-01

One of the key components of a chemical gas sensor is a MEMS micro-heater. Micro-heaters are used in both semiconductor gas sensors and NDIR gas sensors; however they each require different heat dissipation characteristics. For the semiconductor gas sensors, a uniform temperature is required over a wide area of the heater. On the other hand, for the NDIR gas sensor, the micro-heater needs high levels of infrared radiation in order to increase sensitivity. In this study, a novel design of a poly-Si micro-heater is proposed to improve the uniformity of heat dissipation on the heating plate. Temperature uniformity of the micro-heater is achieved by compensating for the variation in power consumption around the perimeter of the heater. With the power compensated design, the uniform heating area is increased by 2.5 times and the average temperature goes up by 40 °C. Therefore, this power compensated micro-heater design is suitable for a semiconductor gas sensor. Meanwhile, the poly-Si micro-heater without compensation shows a higher level of infrared radiation under equal power consumption conditions. This indicates that the micro-heater without compensation is more suitable for a NDIR gas sensor. Furthermore, the micro-heater shows a short response time of less than 20 ms, indicating a very high efficiency of pulse driving.

Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures

NASA Astrophysics Data System (ADS)

Chung, Gwiy-Sang; Choi, Sung-Kyu; Nam, Hoy-Duck

2001-10-01

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro electro mechanical system) applications using SDB and SOI membranes and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10 micrometers thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro- heater was fabricated with Pt-RTD on the same substrate by using MgO as medium layer. The thermal characteristics of the micro-heater with the SOI membrane is 280 degree(s)C at input power 0.9 W; for the SOI membrane with 10 trenches, it is 580 degree(s)C due to reduction of the external thermal loss. Consequently, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

Study of surface properties of ATLAS12 strip sensors and their radiation resistance

NASA Astrophysics Data System (ADS)

Mikestikova, M.; Allport, P. P.; Baca, M.; Broughton, J.; Chisholm, A.; Nikolopoulos, K.; Pyatt, S.; Thomas, J. P.; Wilson, J. A.; Kierstead, J.; Kuczewski, P.; Lynn, D.; Hommels, L. B. A.; Ullan, M.; Bloch, I.; Gregor, I. M.; Tackmann, K.; Hauser, M.; Jakobs, K.; Kuehn, S.; Mahboubi, K.; Mori, R.; Parzefall, U.; Clark, A.; Ferrere, D.; Sevilla, S. Gonzalez; Ashby, J.; Blue, A.; Bates, R.; Buttar, C.; Doherty, F.; McMullen, T.; McEwan, F.; O'Shea, V.; Kamada, S.; Yamamura, K.; Ikegami, Y.; Nakamura, K.; Takubo, Y.; Unno, Y.; Takashima, R.; Chilingarov, A.; Fox, H.; Affolder, A. A.; Casse, G.; Dervan, P.; Forshaw, D.; Greenall, A.; Wonsak, S.; Wormald, M.; Cindro, V.; Kramberger, G.; Mandić, I.; Mikuž, M.; Gorelov, I.; Hoeferkamp, M.; Palni, P.; Seidel, S.; Taylor, A.; Toms, K.; Wang, R.; Hessey, N. P.; Valencic, N.; Hanagaki, K.; Dolezal, Z.; Kodys, P.; Bohm, J.; Stastny, J.; Bevan, A.; Beck, G.; Milke, C.; Domingo, M.; Fadeyev, V.; Galloway, Z.; Hibbard-Lubow, D.; Liang, Z.; Sadrozinski, H. F.-W.; Seiden, A.; To, K.; French, R.; Hodgson, P.; Marin-Reyes, H.; Parker, K.; Jinnouchi, O.; Hara, K.; Sato, K.; Hagihara, M.; Iwabuchi, S.; Bernabeu, J.; Civera, J. V.; Garcia, C.; Lacasta, C.; Marti i Garcia, S.; Rodriguez, D.; Santoyo, D.; Solaz, C.; Soldevila, U.

2016-09-01

A radiation hard n+-in-p micro-strip sensor for the use in the Upgrade of the strip tracker of the ATLAS experiment at the High Luminosity Large Hadron Collider (HL-LHC) has been developed by the "ATLAS ITk Strip Sensor collaboration" and produced by Hamamatsu Photonics. Surface properties of different types of end-cap and barrel miniature sensors of the latest sensor design ATLAS12 have been studied before and after irradiation. The tested barrel sensors vary in "punch-through protection" (PTP) structure, and the end-cap sensors, whose stereo-strips differ in fan geometry, in strip pitch and in edge strip ganging options. Sensors have been irradiated with proton fluences of up to 1×1016 neq/cm2, by reactor neutron fluence of 1×1015 neq/cm2 and by gamma rays from 60Co up to dose of 1 MGy. The main goal of the present study is to characterize the leakage current for micro-discharge breakdown voltage estimation, the inter-strip resistance and capacitance, the bias resistance and the effectiveness of PTP structures as a function of bias voltage and fluence. It has been verified that the ATLAS12 sensors have high breakdown voltage well above the operational voltage which implies that different geometries of sensors do not influence their stability. The inter-strip isolation is a strong function of irradiation fluence, however the sensor performance is acceptable in the expected range for HL-LHC. New gated PTP structure exhibits low PTP onset voltage and sharp cut-off of effective resistance even at the highest tested radiation fluence. The inter-strip capacitance complies with the technical specification required before irradiation and no radiation-induced degradation was observed. A summary of ATLAS12 sensors tests is presented including a comparison of results from different irradiation sites. The measured characteristics are compared with the previous prototype of the sensor design, ATLAS07.

Research on sensor design for internet of things and laser manufacturing

NASA Astrophysics Data System (ADS)

Wang, Tao; Yao, Jianquan; Guo, Ling; Zhang, Yanchun

2010-12-01

In this paper, we will introduce the research on sensor design for IOT (Internet of Things) and laser manufacturing, and supporting the establishment of local area IOT. The main contents include studying on the structure designing of silicon micro tilt sensor, data acquisition and processing, addressing implanted and building Local Area IOT with wireless sensor network technology. At last, it is discussed the status and trends of the Internet of Things from the promoters, watchers, pessimists and doers.

Fabrication of locally micro-structured fiber Bragg gratings by fs-laser machining

NASA Astrophysics Data System (ADS)

Dutz, Franz J.; Stephan, Valentin; Marchi, Gabriele; Koch, Alexander W.; Roths, Johannes; Huber, Heinz P.

2018-06-01

Here, we describe a method for producing locally micro-structured fiber Bragg gratings (LMFGB) by fs-laser machining. This technique enables the precise and reproducible ablation of cladding material to create circumferential grooves inside the claddings of optical fibers. From initial ablation experiments we acquired optimized process parameters. The fabricated grooves were located in the middle of uniform type I fiber Bragg gratings. LMFBGs with four different groove widths of 48, 85, 135 and 205 μ { {m}} were produced. The grooves exhibited constant depths of about 30 μ {m} and steep sidewall angles. With the combination of micro-structures and fiber Bragg gratings, fiber optic sensor elements with enhanced functionalities can be achieved.

[Intracranial pressure monitoring apparatus for clinical use balanced pressure sensors].

PubMed

Numoto, M

1976-04-01

Three types of pressure sensors, (1) electric pressure switch, (2) fiber optic pressure switch and (3) pressure indicating bag for intracranial pressure monitoring which were developed by the author are described. Advantages and disadvantages between them are also discussed. The electric pressure switch is relatively simple in construction but has a possibility of producing micro-shock hazard in case of accidental electric leakage. The fiber optic pressure switch is the safest for the micro shock but its structure is rather complicated and fragile. The pressure indicating bag is simple to make and durable to use. However, it has a hydrostatic effect.

Study on Silicon Microstructure Processing Technology Based on Porous Silicon

NASA Astrophysics Data System (ADS)

Shang, Yingqi; Zhang, Linchao; Qi, Hong; Wu, Yalin; Zhang, Yan; Chen, Jing

2018-03-01

Aiming at the heterogeneity of micro - sealed cavity in silicon microstructure processing technology, the technique of preparing micro - sealed cavity of porous silicon is proposed. The effects of different solutions, different substrate doping concentrations, different current densities, and different etching times on the rate, porosity, thickness and morphology of the prepared porous silicon were studied. The porous silicon was prepared by different process parameters and the prepared porous silicon was tested and analyzed. For the test results, optimize the process parameters and experiments. The experimental results show that the porous silicon can be controlled by optimizing the parameters of the etching solution and the doping concentration of the substrate, and the preparation of porous silicon with different porosity can be realized by different doping concentration, so as to realize the preparation of silicon micro-sealed cavity, to solve the sensor sensitive micro-sealed cavity structure heterogeneous problem, greatly increasing the application of the sensor.

Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure

NASA Astrophysics Data System (ADS)

Xu, Tingzhong; Wang, Hongyan; Xia, Yong; Zhao, Zhiming; Huang, Mimi; Wang, Jiuhong; Zhao, Libo; Zhao, Yulong; Jiang, Zhuangde

2017-12-01

A novel micro-electromechanical systems piezoresistive pressure sensor with a diagonally positioned peninsula-island structure has high sensitivity for ultralow- pressure measurement. The pressure sensor was designed with a working range of 0-500 Pa and had a high sensitivity of 0.06 mV·V-1·Pa-1. The trade-off between high sensitivity and linearity was alleviated. Moreover, the influence of the installation angle on the sensing chip output was analyzed, and an application experiment of the sensor was conducted using the built pipettor test platform. Findings indicated that the proposed pressure sensor had sufficient resolution ability and accuracy to detect the pressure variation in the pipettor chamber. Therefore, the proposed pressure sensor has strong potential for medical equipment application.

Hair-based sensors for micro-autonomous systems

NASA Astrophysics Data System (ADS)

Sadeghi, Mahdi M.; Peterson, Rebecca L.; Najafi, Khalil

2012-06-01

We seek to harness microelectromechanical systems (MEMS) technologies to build biomimetic devices for low-power, high-performance, robust sensors and actuators on micro-autonomous robot platforms. Hair is used abundantly in nature for a variety of functions including balance and inertial sensing, flow sensing and aerodynamic (air foil) control, tactile and touch sensing, insulation and temperature control, particle filtering, and gas/chemical sensing. Biological hairs, which are typically characterized by large surface/volume ratios and mechanical amplification of movement, can be distributed in large numbers over large areas providing unprecedented sensitivity, redundancy, and stability (robustness). Local neural transduction allows for space- and power-efficient signal processing. Moreover by varying the hair structure and transduction mechanism, the basic hair form can be used for a wide diversity of functions. In this paper, by exploiting a novel wafer-level, bubble-free liquid encapsulation technology, we make arrays of micro-hydraulic cells capable of electrostatic actuation and hydraulic amplification, which enables high force/high deflection actuation and extremely sensitive detection (sensing) at low power. By attachment of cilia (hair) to the micro-hydraulic cell, air flow sensors with excellent sensitivity (< few cm/s) and dynamic range (> 10 m/s) have been built. A second-generation design has significantly reduced the sensor response time while maintaining sensitivity of about 2 cm/s and dynamic range of more than 15 m/s. These sensors can be used for dynamic flight control of flying robots or for situational awareness in surveillance applications. The core biomimetic technologies developed are applicable to a broad range of sensors and actuators.

Further Structural Intelligence for Sensors Cluster Technology in Manufacturing

PubMed Central

Mekid, Samir

2006-01-01

With the ever increasing complex sensing and actuating tasks in manufacturing plants, intelligent sensors cluster in hybrid networks becomes a rapidly expanding area. They play a dominant role in many fields from macro and micro scale. Global object control and the ability to self organize into fault-tolerant and scalable systems are expected for high level applications. In this paper, new structural concepts of intelligent sensors and networks with new intelligent agents are presented. Embedding new functionalities to dynamically manage cooperative agents for autonomous machines are interesting key enabling technologies most required in manufacturing for zero defects production.

Review of Polyimides Used in the Manufacturing of Micro Systems

NASA Technical Reports Server (NTRS)

Wilson, William C.; Atkinson, Gary M.

2007-01-01

Since their invention, polyimides have found numerous uses in MicroElectroMechanical Systems (MEMS) technology. Polyimides can act as photoresist, sacrificial layers, structural layers, and even as a replacement for silicon as the substrate during MEMS fabrication. They enable fabrication of both low and high aspect ratio devices. Polyimides have been used to fabricate expendable molds and reusable flexible molds. Development of a variety of devices that employ polyimides for sensor applications has occurred. Micro-robotic actuator applications include hinges, thermal actuators and residual stress actuators. Currently, polyimides are being used to create new sensors and devices for aerospace applications. This paper presents a review of some of the many uses of polyimides in the development of MEMS devices, including a new polyimide based MEMS fabrication process.

Novel Fabry-Perot fiber optic sensor with multiple applications

NASA Astrophysics Data System (ADS)

Chen, Xiaopei; Shen, Fabin; Wang, Anbo; Wang, Zhuang; Zhang, Yan

2004-12-01

A novel Intrinsic Fabry-Perot fiber-optic sensor is presented in this paper. The sensors were made through two simple steps: wet chemical etch and fusion splice. Micro air-gaps were generated inside the fibers and functioned as reflective mirrors. This procedure not only provides a simple and cost effective technology for fabricating intrinsic Fabry-Perot Interferometric (IFPI) fiber sensors, but also provides two possible IFPI structures. Both of the fiber cavity between the air-gaps or the air-gap and cleaved fiber end can be used as sensing elements. With these two structures, this sensor can be used to measure the temperature, strain, pressure, refractive index of chemicals and the thin film thickness by itself. Multi-point measurements can also be achieved by multiplexing. Furthermore, it also can be multiplexed with other sensors such as Long Period Gratings (LPG) to provide compensations for other perturbation sensing. Theoretical and experimental studies of two sensor structures are described. Experimental results show that high resolution and high sensitivity can be obtained with appropriate signal processing.

Femtosecond Laser Fabrication of Monolithically Integrated Microfluidic Sensors in Glass

PubMed Central

He, Fei; Liao, Yang; Lin, Jintian; Song, Jiangxin; Qiao, Lingling; Cheng, Ya; Sugioka, Koji

2014-01-01

Femtosecond lasers have revolutionized the processing of materials, since their ultrashort pulse width and extremely high peak intensity allows high-quality micro- and nanofabrication of three-dimensional (3D) structures. This unique capability opens up a new route for fabrication of microfluidic sensors for biochemical applications. The present paper presents a comprehensive review of recent advancements in femtosecond laser processing of glass for a variety of microfluidic sensor applications. These include 3D integration of micro-/nanofluidic, optofluidic, electrofluidic, surface-enhanced Raman-scattering devices, in addition to fabrication of devices for microfluidic bioassays and lab-on-fiber sensors. This paper describes the unique characteristics of femtosecond laser processing and the basic concepts involved in femtosecond laser direct writing. Advanced spatiotemporal beam shaping methods are also discussed. Typical examples of microfluidic sensors fabricated using femtosecond lasers are then highlighted, and their applications in chemical and biological sensing are described. Finally, a summary of the technology is given and the outlook for further developments in this field is considered. PMID:25330047

Nafion/lead nitroprusside nanoparticles modified carbon ceramic electrode as a novel amperometric sensor for L-cysteine.

PubMed

Razmi, H; Heidari, H

2009-05-01

This work describes the electrochemical and electrocatalytic properties of carbon ceramic electrode (CCE) modified with lead nitroprusside (PbNP) nanoparticles as a new electrocatalyst material. The structure of deposited film on the CCE was characterized by energy dispersive X-ray (EDX), Fourier transform infrared (FTIR), and scanning electron microscopy (SEM). The cyclic voltammogram (CV) of the PbNP modified CCE showed two well-defined redox couples due to [Fe(CN)5NO](3-)/[Fe(CN)5NO](2-) and Pb(IV)/Pb(II) redox reactions. The modified electrode showed electrocatalytic activity toward the oxidation of L-cysteine and was used as an amperometric sensor. Also, to reduce the fouling effect of L-cysteine and its oxidation products on the modified electrode, a thin film of Nafion was coated on the electrode surface. The sensor response was linearly changed with L-cysteine concentration in the range of 1 x 10(-6) to 6.72 x 10(-5)mol L(-1) with a detection limit (signal/noise ratio [S/N]=3) of 0.46 microM. The sensor sensitivity was 0.17 microA (microM)(-1), and some important advantages such as simple preparation, fast response, good stability, interference-free signals, antifouling properties, and reproducibility of the sensor for amperometric determination of L-cysteine were achieved.

Micro-strip sensors based on CVD diamond

NASA Astrophysics Data System (ADS)

Adam, W.; Berdermann, E.; Bergonzo, P.; Bertuccio, G.; Bogani, F.; Borchi, E.; Brambilla, A.; Bruzzi, M.; Colledani, C.; Conway, J.; D'Angelo, P.; Dabrowski, W.; Delpierre, P.; Deneuville, A.; Dulinski, W.; van Eijk, B.; Fallou, A.; Fizzotti, F.; Foulon, F.; Friedl, M.; Gan, K. K.; Gheeraert, E.; Hallewell, G.; Han, S.; Hartjes, F.; Hrubec, J.; Husson, D.; Kagan, H.; Kania, D.; Kaplon, J.; Kass, R.; Koeth, T.; Krammer, M.; Logiudice, A.; Lu, R.; mac Lynne, L.; Manfredotti, C.; Meier, D.; Mishina, M.; Moroni, L.; Oh, A.; Pan, L. S.; Pernicka, M.; Peitz, A.; Perera, L.; Pirollo, S.; Procario, M.; Riester, J. L.; Roe, S.; Rousseau, L.; Rudge, A.; Russ, J.; Sala, S.; Sampietro, M.; Schnetzer, S.; Sciortino, S.; Stelzer, H.; Stone, R.; Suter, B.; Tapper, R. J.; Tesarek, R.; Trischuk, W.; Tromson, D.; Vittone, E.; Walsh, A. M.; Wedenig, R.; Weilhammer, P.; Wetstein, M.; White, C.; Zeuner, W.; Zoeller, M.; RD42 Collaboration

2000-10-01

In this article we present the performance of recent chemical vapour deposition (CVD) diamond micro-strip sensors in beam tests. In addition, we present the first comparison of a CVD diamond micro-strip sensor before and after proton irradiation.

A micro-vibration generated method for testing the imaging quality on ground of space remote sensing

NASA Astrophysics Data System (ADS)

Gu, Yingying; Wang, Li; Wu, Qingwen

2018-03-01

In this paper, a novel method is proposed, which can simulate satellite platform micro-vibration and test the impact of satellite micro-vibration on imaging quality of space optical remote sensor on ground. The method can generate micro-vibration of satellite platform in orbit from vibrational degrees of freedom, spectrum, magnitude, and coupling path. Experiment results show that the relative error of acceleration control is within 7%, in frequencies from 7Hz to 40Hz. Utilizing this method, the system level test about the micro-vibration impact on imaging quality of space optical remote sensor can be realized. This method will have an important applications in testing micro-vibration tolerance margin of optical remote sensor, verifying vibration isolation and suppression performance of optical remote sensor, exploring the principle of micro-vibration impact on imaging quality of optical remote sensor.

Modeling Impact-induced Failure of Polysilicon MEMS: A Multi-scale Approach.

PubMed

Mariani, Stefano; Ghisi, Aldo; Corigliano, Alberto; Zerbini, Sarah

2009-01-01

Failure of packaged polysilicon micro-electro-mechanical systems (MEMS) subjected to impacts involves phenomena occurring at several length-scales. In this paper we present a multi-scale finite element approach to properly allow for: (i) the propagation of stress waves inside the package; (ii) the dynamics of the whole MEMS; (iii) the spreading of micro-cracking in the failing part(s) of the sensor. Through Monte Carlo simulations, some effects of polysilicon micro-structure on the failure mode are elucidated.

Technical standards for micro sensors in surgery and minimally invasive therapy.

PubMed

Neuder; Dehm

2004-04-01

The development of medical applications is fuelled in the context of steadily growing needs and the requirement of lowering overall costs. Micro systems will have an extremely important impact on medical technology in the future. The great challenges for the wider use of micro structures in health applications are biocompatibility and mass production. Especially small and medium-sized enterprises (SMEs) need help to overcome these problems by free access to knowledge, the availability of standards and contacts to partners.

In situ measurement of the junction temperature of light emitting diodes using a flexible micro temperature sensor.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Fan, Wei-Yuan; Hsieh, Wei-Jung

2009-01-01

This investigation aimed to fabricate a flexible micro resistive temperature sensor to measure the junction temperature of a light emitting diode (LED). The junction temperature is typically measured using a thermal resistance measurement approach. This approach is limited in that no standard regulates the timing of data capture. This work presents a micro temperature sensor that can measure temperature stably and continuously, and has the advantages of being lightweight and able to monitor junction temperatures in real time. Micro-electro-mechanical-systems (MEMS) technologies are employed to minimize the size of a temperature sensor that is constructed on a stainless steel foil substrate (SS-304 with 30 μm thickness). A flexible micro resistive temperature sensor can be fixed between the LED chip and the frame. The junction temperature of the LED can be measured from the linear relationship between the temperature and the resistance. The sensitivity of the micro temperature sensor is 0.059 ± 0.004 Ω/°C. The temperature of the commercial CREE(®) EZ1000 chip is 119.97 °C when it is thermally stable, as measured using the micro temperature sensor; however, it was 126.9 °C, when measured by thermal resistance measurement. The micro temperature sensor can be used to replace thermal resistance measurement and performs reliably.

A Two-Axis Direct Fluid Shear Stress Sensor

NASA Technical Reports Server (NTRS)

Adcock, Edward E.; Scott, Michael A.; Bajikar, Sateesh S.

2010-01-01

This innovation is a miniature or micro sized semiconductor sensor design that provides two axis direct non-intrusive measurement of skin friction or wall shear stress in fluid flow. The sensor is fabricated by micro-electro-mechanical system (MEMS) technology, enabling small size and low cost reproductions. The sensors have been fabricated by utilizing MEMS fabrication processes to bond a sensing element wafer to a fluid coupling wafer. This layering technique provides for an out of plane dimension that is on the same order of length as the inplane dimensions. The sensor design has the following characteristics: a shear force collecting plate with dimensions that can be tailored to various application specific requirements such as spatial resolution, temporal resolution and shear force range and resolution. This plate is located coplanar to both the sensor body and flow boundary, and is connected to a dual axis gimbal structure by a connecting column or lever arm. The dual axis gimbal structure has torsional hinges with embedded piezoresistive torsional strain gauges which provide a voltage output that is correlated to the applied shear stress (and excitation current) on force collection plate that is located on the flow boundary surface (hence the transduction method). This combination of design elements create a force concentration and resolution structure that enables the generation of a large stress on the strain gauge from the small shear stress on the flow boundary wall. This design as well as the use of back side electrical contacts establishes a non-intrusive method to quantitatively measure the shear force vector on aerodynamic bodies.

Fabrication of a 3D micro/nano dual-scale carbon array and its demonstration as the microelectrodes for supercapacitors

NASA Astrophysics Data System (ADS)

Jiang, Shulan; Shi, Tielin; Gao, Yang; Long, Hu; Xi, Shuang; Tang, Zirong

2014-04-01

An easily accessible method is proposed for the fabrication of a 3D micro/nano dual-scale carbon array with a large surface area. The process mainly consists of three critical steps. Firstly, a hemispherical photoresist micro-array was obtained by the cost-effective nanoimprint lithography process. Then the micro-array was transformed into hierarchical structures with longitudinal nanowires on the microstructure surface by oxygen plasma etching. Finally, the micro/nano dual-scale carbon array was fabricated by carbonizing these hierarchical photoresist structures. It has also been demonstrated that the micro/nano dual-scale carbon array can be used as the microelectrodes for supercapacitors by the electrodeposition of a manganese dioxide (MnO2) film onto the hierarchical carbon structures with greatly enhanced electrochemical performance. The specific gravimetric capacitance of the deposited micro/nano dual-scale microelectrodes is estimated to be 337 F g-1 at the scan rate of 5 mV s-1. This proposed approach of fabricating a micro/nano dual-scale carbon array provides a facile way in large-scale microstructures’ manufacturing for a wide variety of applications, including sensors and on-chip energy storage devices.

MEMS inertial sensors with integral rotation means.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kohler, Stewart M.

The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertialmore » micro-sensors.« less

Piezoelectric Active Humidity Sensors Based on Lead-Free NaNbO₃ Piezoelectric Nanofibers.

PubMed

Gu, Li; Zhou, Di; Cao, Jun Cheng

2016-06-07

The development of micro-/nano-scaled energy harvesters and the self-powered sensor system has attracted great attention due to the miniaturization and integration of the micro-device. In this work, lead-free NaNbO₃ piezoelectric nanofibers with a monoclinic perovskite structure were synthesized by the far-field electrospinning method. The flexible active humidity sensors were fabricated by transferring the nanofibers from silicon to a soft polymer substrate. The sensors exhibited outstanding piezoelectric energy-harvesting performance with output voltage up to 2 V during the vibration process. The output voltage generated by the NaNbO₃ sensors exhibited a negative correlation with the environmental humidity varying from 5% to 80%, where the peak-to-peak value of the output voltage generated by the sensors decreased from 0.40 to 0.07 V. The sensor also exhibited a short response time, good selectively against ethanol steam, and great temperature stability. The piezoelectric active humidity sensing property could be attributed to the increased leakage current in the NaNbO₃ nanofibers, which was generated due to proton hopping among the H₃O⁺ groups in the absorbed H₂O layers under the driving force of the piezoelectric potential.

Numerical analysis of a 3D optical sensor based on single mode fiber to multimode interference graphene design

NASA Astrophysics Data System (ADS)

Mutter, Kussay N.; Jafri, Zubir M.; Tan, Kok Chooi

2016-04-01

In this paper, the simulation and design of a waveguide for water turbidity sensing are presented. The structure of the proposed sensor uses a 2x2 array of multimode interference (MMI) coupler based on micro graphene waveguide for high sensitivity. The beam propagation method (BPM) are used to efficiently design the sensor structure. The structure is consist of an array of two by two elements of sensors. Each element has three sections of single mode for field input tapered to MMI as the main core sensor without cladding which is graphene based material, and then a single mode fiber as an output. In this configuration MMI responses to any change in the environment. We validate and present the results by implementing the design on a set of sucrose solution and showing how these samples lead to a sensitivity change in the sensor based on the MMI structures. Overall results, the 3D design has a feasible and effective sensing by drawing topographical distribution of suspended particles in the water.

A MEMS SOI-based piezoresistive fluid flow sensor

NASA Astrophysics Data System (ADS)

Tian, B.; Li, H. F.; Yang, H.; Song, D. L.; Bai, X. W.; Zhao, Y. L.

2018-02-01

In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 × 10-4 V ms2/kg.

Sensitivity enhancement in optical micro-tube resonator sensors via mode coupling

NASA Astrophysics Data System (ADS)

Ling, Tao; Guo, L. Jay

2013-07-01

A liquid filled, silica micro-tube with a low refractive index material inner-coating has been proposed and theoretically studied as a coupled micro-resonator sensor to greatly enhance biochemical sensor sensitivity. Its unique coupling phenomenon has been analyzed and utilized to boost the device's refractive index sensitivity to 967 nm/Refractive Index Unit (RIU). Through optimization of the coupling strength between the two micro-resonators, further improvement in refractive index sensitivity up to 1100 nm/RIU has been predicted. This mode coupling strategy allows us to design robust, thick-walled micro-tube sensors with ultra-high sensitivity which is useful in practical biochemical sensing applications.

Thermoelastic damping effect of the micro-ring resonator with irregular mass and stiffness

NASA Astrophysics Data System (ADS)

Kim, Jung-Hwan; Kim, Ji-Hwan

2016-05-01

Fundamentally, vibration characteristic is a main factor for the stability of structures. In this regard, the irregularity of mass and stiffness distributions for the structure have been an interesting issue for many years. Recently, the Micro Electro Mechanical Systems (MEMS) are developed for various applications such as gyro sensors. In the present work, in-plane vibration of micro-ring structure with multiple finite-sized imperfections is investigated. Then, the unbalance of the structure is represented using Heaviside Step Function for the inextensional modeling of the ring. Also, thermoelastic damping (TED) due to internal friction is studied based on Fourier's one-dimensional heat conduction equation using Laplace Transform. To obtain the quality-factors (Q-factors) for imperfect micro-ring, analytical solutions are calculated from governing equations of motion with TED. And then, the natural frequencies and the Q-factors are observed to separate into lower and higher modes. Additionally, the vibration mode shapes are presented, and the frequency trimming concept due to attached imperfections is investigated.

Low power sensor network for wireless condition monitoring

NASA Astrophysics Data System (ADS)

Richter, Ch.; Frankenstein, B.; Schubert, L.; Weihnacht, B.; Friedmann, H.; Ebert, C.

2009-03-01

For comprehensive fatigue tests and surveillance of large scale structures, a vibration monitoring system working in the Hz and sub Hz frequency range was realized and tested. The system is based on a wireless sensor network and focuses especially on the realization of a low power measurement, signal processing and communication. Regarding the development, we met the challenge of synchronizing the wireless connected sensor nodes with sufficient accuracy. The sensor nodes ware realized by compact, sensor near signal processing structures containing components for analog preprocessing of acoustic signals, their digitization, algorithms for data reduction and network communication. The core component is a digital micro controller which performs the basic algorithms necessary for the data acquisition synchronization and the filtering. As a first application, the system was installed in a rotor blade of a wind power turbine in order to monitor the Eigen modes over a longer period of time. Currently the sensor nodes are battery powered.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1997-01-01

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor (50). An optical fiber micro-light source (50) is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors (22) in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material (60). This process allows significant control of the size of the micro light source (50). Furthermore, photo-chemically attaching an optically active material (60) enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1997-05-06

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 10 figs.

Microelectromechanical Systems; A DoD Dual Use Technology Industrial Assessment.

DTIC Science & Technology

1995-12-01

systems, • embedded sensors and actuators for condition-based maintenance of machines and vehicles, on-demand amplified structural strength in...will transmit temperature, pressure, and number-of- rotations information to a hand-held receiver used by the maintenance and service personnel. This...automobile industry being the major driver for most micro- machined sensors (pressure, acceleration and oxygen). In 1994 model year Projected Growth

Design and Characterization of a Novel Bio-inspired Hair Flow Sensor Based on Resonant Sensing

NASA Astrophysics Data System (ADS)

Guo, X.; Yang, B.; Wang, Q. H.; Lu, C. F.; Hu, D.

2018-03-01

Flow sensors inspired by the natural hair sensing mechanism have great prospect in the research of micro-autonomous system and technology (MAST) for the three-dimensional structure characteristics with high spatial and quality utilization. A novel bio-inspired hair flow sensor (BHFS) based on resonant sensing with a unique asymmetric design is presented in this paper. A hair transducer and a signal detector which is constituted of a two-stage micro-leverage mechanism and two symmetrical resonators (double ended tuning fork, DETF) are adopted to realize the high sensitivity to air flow. The sensitivity of the proposed BHFS is improved significantly than the published ones due to the high sensitivity of resonators and the higher amplification factor possessed by the two-stage micro-leverage mechanism. The standard deep dry silicon on glass (DDSOG) process is chosen to fabricate the proposed BHFS. The experiment result demonstrates that the fabricated BHFS has a mechanical sensitivity of 5.26 Hz/(m/s)2 at a resonant frequency of 22 kHz with the hair height of 6 mm.

Lens-free imaging-based low-cost microsensor for in-line wear debris detection in lube oils

NASA Astrophysics Data System (ADS)

Mabe, Jon; Zubia, Joseba; Gorritxategi, Eneko

2017-02-01

The current paper describes the application of lens-free imaging principles for the detection and classification of wear debris in lubricant oils. The potential benefits brought by the lens-free microscopy techniques in terms of resolution, deep of field and active areas have been tailored to develop a micro sensor for the in-line monitoring of wear debris in oils used in lubricated or hydraulic machines as gearboxes, actuators, engines, etc. The current work presents a laboratory test-bench used for evaluating the optical performance of the lens-free approach applied to the wear particle detection in oil samples. Additionally, the current prototype sensor is presented, which integrates a LED light source, CMOS imager, embedded CPU, the measurement cell and the appropriate optical components for setting up the lens-free system. The imaging performance is quantified using micro structured samples, as well as by imaging real used lubricant oils. Probing a large volume with a decent 2D spatial resolution, this lens-free micro sensor can provide a powerful tool at very low cost for inline wear debris monitoring.

Effect of heater geometry and cavity volume on the sensitivity of a thermal convection-based tilt sensor

NASA Astrophysics Data System (ADS)

Han, Maeum; Keon Kim, Jae; Kong, Seong Ho; Kang, Shin-Won; Jung, Daewoong

2018-06-01

This paper reports a micro-electro-mechanical-system (MEMS)-based tilt sensor using air medium. Since the working mechanism of the sensor is the thermal convection in a sealed chamber, structural parameters that can affect thermal convection must be considered to optimize the performance of the sensor. This paper presents the experimental results that were conducted by optimizing several parameters such as the heater geometry, input power and cavity volume. We observed that an increase in the heating power and cavity volume can improve the sensitivity, and heater geometry plays important role in performance of the sensor.

Design of micro bending deformer for optical fiber weight sensor

NASA Astrophysics Data System (ADS)

Ula, R. K.; Hanto, D.; Waluyo, T. B.; Adinanta, H.; Widiyatmoko, B.

2017-04-01

The road damage due to excessive load is one of the causes of accidents on the road. A device to measure weight of the passing vehicles needs to be planted in the road structure. Thus, a weight sensor for the passing vehicles is required. In this study, we designed a weight sensor for a static load based on a power loss due to a micro bending on the optical fiber flanked on a board. The following main components are used i.e. LED 1310 nm as a light source, a multimode fiber optic as a transmission media and a power meter for measuring power loss. This works focuses on obtaining a suitable deformer design for weight sensor. Experimental results show that deformer design with 1.5 mm single side has level of accuracy as 4.32% while the design with 1.5 mm double side has level of accuracy as 98.77%. Increasing deformer length to 2.5 mm gives 71.18% level of accuracy for single side, and 76.94% level of accuracy for double side. Micro bending design with 1.5 mm double side has a high sensitivity and it is also capable of measuring load up to 100 kg. The sensor designed has been tested for measuring the weight of motor cycle, and it can be upgraded for measuring heavy vehicles.

Pulse-driven micro gas sensor fitted with clustered Pd/SnO2 nanoparticles.

PubMed

Suematsu, Koichi; Shin, Yuka; Ma, Nan; Oyama, Tokiharu; Sasaki, Miyuki; Yuasa, Masayoshi; Kida, Tetsuya; Shimanoe, Kengo

2015-08-18

Real-time monitoring of specific gas concentrations with a compact and portable gas sensing device is required to sense potential health risk and danger from toxic gases. For such purposes, we developed an ultrasmall gas sensor device, where a micro sensing film was deposited on a micro heater integrated with electrodes fabricated by the microelectromechanical system (MEMS) technology. The developed device was operated in a pulse-heating mode to significantly reduce the heater power consumption and make the device battery-driven and portable. Using clustered Pd/SnO2 nanoparticles, we succeeded in introducing mesopores ranging from 10 to 30 nm in the micro gas sensing film (area: ϕ 150 μm) to detect large volatile organic compounds (VOCs). The micro sensor showed quick, stable, and high sensor responses to toluene at ppm (parts per million) concentrations at 300 °C even by operating the micro heater in a pulse-heating mode where switch-on and -off cycles were repeated at one-second intervals. The high performance of the micro sensor should result from the creation of efficient diffusion paths decorated with Pd sensitizers by using the clustered Pd/SnO2 nanoparticles. Hence we demonstrate that our pulse-driven micro sensor using nanostructured oxide materials holds promise as a battery-operable, portable gas sensing device.

Microelectromechanical Systems for Aerodynamics Applications

NASA Technical Reports Server (NTRS)

Mehregany, Mehran; DeAnna, Russell G.; Reshotko, Eli

1996-01-01

Microelectromechanical systems (MEMS) embody the integration of sensors, actuators, and electronics on a single substrate using integrated circuit fabrication techniques and compatible micromachining processes. Silicon and its derivatives form the material base for the MEMS technology. MEMS devices, including micro-sensors and micro-actuators, are attractive because they can be made small (characteristic dimension about microns), be produced in large numbers with uniform performance, include electronics for high performance and sophisticated functionality, and be inexpensive. MEMS pressure sensors, wall-shear-stress sensors, and micromachined hot-wires are nearing application in aeronautics. MEMS actuators face a tougher challenge since they have to be scaled (up) to the physical phenomena that are being controlled. MEMS actuators are proposed, for example, for controlling the small structures in a turbulent boundary layer, for aircraft control, for cooling, and for mixing enhancement. Data acquisition or control logistics require integration of electronics along with the transducer elements with appropriate consideration of analog-to-digital conversion, multiplexing, and telemetry. Altogether, MEMS technology offers exciting opportunities for aerodynamics applications both in wind tunnels and in flight

Characterization and optimization of flexible dual mode sensor based on Carbon Micro Coils

NASA Astrophysics Data System (ADS)

Dat Nguyen, Tien; Kim, Taeseung; Han, Hyoseung; Shin, Hyun Yeong; Nguyen, Canh Toan; Phung, Hoa; Ryeol Choi, Hyouk

2018-01-01

Carbon Microcoils (CMCs) is a 3D helical micro structure grown via a chemical vapor deposition process. It is noted that composites in which CMCs are embedded in polymer matrixes, called CMC sheets, experience a drastic change of electrical impedance depending on the proximity and contact of external objects. In this paper, a dual functional sensor, that is, tactile and proximity sensor fabricated with CMC/silicone composite is presented to demonstrate the advanced characteristics of CMCs sheets. Characteristics of sensor responses depending on CMC compositions are investigated and optimal conditions are determined. The candidates of polymer matrices are also investigated. As the results, the CMC sheet consisting of Ecoflex 30, CMC 30 {{wt}} % , and multiwall carbon nanotubes 1 {{wt}} % shows the most appropriate tactile sensing characteristics with more than 1 mm of thickness. The proximity sensing capability is the maximum when the 1.5 {{wt}} % CMC content is mixed with Dragon skin 30 silicone substrate. Finally, multiple target objects are recognized with the results and their feasibilities are experimentally validated.

Micro-Machined Thin Film Sensor Arrays For The Detection Of H2, Containing Gases, And Method Of Making And Using The Same.

DOEpatents

DiMeo, Jr., Frank; Baum, Thomas H.

2003-07-22

The present invention provides a hydrogen sensor including a thin film sensor element formed by metal organic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a micro-hotplate structure. The thin film sensor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered response characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magneto resistance, photoconductivity, etc., relative to the response characteristic of the film in the absence of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen permeable barrier may comprise species to scavenge oxygen and other like species. The hydrogen sensor of the invention may be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently configured as a hand-held apparatus.

MEMS (Micro-Electro-Mechanical Systems) for Automotive and Consumer Electronics

NASA Astrophysics Data System (ADS)

Marek, Jiri; Gómez, Udo-Martin

MEMS sensors gained over the last two decades an impressive width of applications: (a) ESP: A car is skidding and stabilizes itself without driver intervention (b) Free-fall detection: A laptop falls to the floor and protects the hard drive by parking the read/write drive head automatically before impact. (c) Airbag: An airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury risk. MEMS sensors are sensing the environmental conditions and are giving input to electronic control systems. These crucial MEMS sensors are making system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Important prerequisites for the success of sensors are their size, functionality, power consumption, and costs. This technical progress in sensor development is realized by micro-machining. The development of these processes was the breakthrough to industrial mass-production for micro-electro-mechanical systems (MEMS). Besides leading-edge micromechanical processes, innovative and robust ASIC designs, thorough simulations of the electrical and mechanical behaviour, a deep understanding of the interactions (mainly over temperature and lifetime) of the package and the mechanical structures are needed. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. This chapter gives an overview of current MEMS technology, its applications and the market share. The MEMS processes are described, and the challenges of MEMS, compared to standard IC fabrication, are discussed. The evolution of MEMS requirements is presented, and a short survey of MEMS applications is shown. Concepts of newest inertial sensors for ESP-systems are given with an emphasis on the design concepts of the sensing element and the evaluation circuit for achieving excellent noise performance. The chapter concludes with an outlook on arising new MEMS applications such as energy harvester and micro fuel cells.

High-Performance Substrates for SERS Detection via Microphotonic Photopolymer Characterization and Coating With Functionalized Hydrogels

DTIC Science & Technology

2006-11-26

with controlled micro and nanostructure for highly selective, high sensitivity assays. The process was modeled and a procedure for fabricating SERS...small volumes with controlled micro and nanostructure for highly selective, high sensitivity assays. We proved the feasibility of the technique and...films templated by colloidal crystals. The control over the film structure allowed optimizing their performance for potential sensor applications. The

Comparison and experimental validation of two potential resonant viscosity sensors in the kilohertz range

NASA Astrophysics Data System (ADS)

Lemaire, Etienne; Heinisch, Martin; Caillard, Benjamin; Jakoby, Bernhard; Dufour, Isabelle

2013-08-01

Oscillating microstructures are well established and find application in many fields. These include force sensors, e.g. AFM micro-cantilevers or accelerometers based on resonant suspended plates. This contribution presents two vibrating mechanical structures acting as force sensors in liquid media in order to measure hydrodynamic interactions. Rectangular cross section microcantilevers as well as circular cross section wires are investigated. Each structure features specific benefits, which are discussed in detail. Furthermore, their mechanical parameters and their deflection in liquids are characterized. Finally, an inverse analytical model is applied to calculate the complex viscosity near the resonant frequency for both types of structures. With this approach it is possible to determine rheological parameters in the kilohertz range in situ within a few seconds. The monitoring of the complex viscosity of yogurt during the fermentation process is used as a proof of concept to qualify at least one of the two sensors in opaque mixtures.

Flexible Bond Wire Capacitive Strain Sensor for Vehicle Tyres.

PubMed

Cao, Siyang; Pyatt, Simon; Anthony, Carl J; Kubba, Ammar I; Kubba, Ali E; Olatunbosun, Oluremi

2016-06-21

The safety of the driving experience and manoeuvrability of a vehicle can be improved by detecting the strain in tyres. To measure strain accurately in rubber, the strain sensor needs to be flexible so that it does not deform the medium that it is measuring. In this work, a novel flexible bond wire capacitive strain sensor for measuring the strain in tyres is developed, fabricated and calibrated. An array of 25 micron diameter wire bonds in an approximately 8 mm × 8 mm area is built to create an interdigitated structure, which consists of 50 wire loops resulting in 49 capacitor pairs in parallel. Laser machining was used to pattern copper on a flexible printed circuit board PCB to make the bond pads for the wire attachment. The wire array was finally packaged and embedded in polydimethylsiloxane (PDMS), which acts as the structural material that is strained. The capacitance of the device is in a linear like relationship with respect to the strain, which can measure the strain up to at least ±60,000 micro-strain (±6%) with a resolution of ~132 micro-strain (0.013%). In-tyre testing under static loading has shown the ability of the sensor to measure large tyre strains. The technology used for sensor fabrication lends itself to mass production and so the design is considered to be consistent with low cost commercialisable strain sensing technology.

Flexible Bond Wire Capacitive Strain Sensor for Vehicle Tyres

PubMed Central

Cao, Siyang; Pyatt, Simon; Anthony, Carl J.; Kubba, Ammar I.; Kubba, Ali E.; Olatunbosun, Oluremi

2016-01-01

The safety of the driving experience and manoeuvrability of a vehicle can be improved by detecting the strain in tyres. To measure strain accurately in rubber, the strain sensor needs to be flexible so that it does not deform the medium that it is measuring. In this work, a novel flexible bond wire capacitive strain sensor for measuring the strain in tyres is developed, fabricated and calibrated. An array of 25 micron diameter wire bonds in an approximately 8 mm × 8 mm area is built to create an interdigitated structure, which consists of 50 wire loops resulting in 49 capacitor pairs in parallel. Laser machining was used to pattern copper on a flexible printed circuit board PCB to make the bond pads for the wire attachment. The wire array was finally packaged and embedded in polydimethylsiloxane (PDMS), which acts as the structural material that is strained. The capacitance of the device is in a linear like relationship with respect to the strain, which can measure the strain up to at least ±60,000 micro-strain (±6%) with a resolution of ~132 micro-strain (0.013%). In-tyre testing under static loading has shown the ability of the sensor to measure large tyre strains. The technology used for sensor fabrication lends itself to mass production and so the design is considered to be consistent with low cost commercialisable strain sensing technology. PMID:27338402

Si light-emitting device in integrated photonic CMOS ICs

NASA Astrophysics Data System (ADS)

Xu, Kaikai; Snyman, Lukas W.; Aharoni, Herzl

2017-07-01

The motivation for integrated Si optoelectronics is the creation of low-cost photonics for mass-market applications. Especially, the growing demand for sensitive biochemical sensors in the environmental control or medicine leads to the development of integrated high resolution sensors. Here CMOS-compatible Si light-emitting device structures are presented for investigating the effect of various depletion layer profiles and defect engineering on the photonic transition in the 1.4-2.8 eV. A novel Si device is proposed to realize both a two-terminal Si-diode light-emitting device and a three-terminal Si gate-controlled diode light-emitting device in the same device structure. In addition to the spectral analysis, differences between two-terminal and three-terminal devices are discussed, showing the light emission efficiency change. The proposed Si optical source may find potential applications in micro-photonic systems and micro-optoelectro-mechanical systems (MOEMS) in CMOS integrated circuitry.

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.

PubMed

Pang, Cheng; Bae, Hyungdae; Gupta, Ashwani; Bryden, Kenneth; Yu, Miao

2013-09-23

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

AFOSR Overview

DTIC Science & Technology

2012-03-05

alloy and tailor micro- structure for turbine blade RZ – Development of scramjet propulsion RW - Developing new fuse and sensors technologies RB...High peak power, ultrashort laser ablation of solids 5. Sustainable alloy design: Rare earth materials challenge 6. Catalytic reactions in...Structural materials & mechanics • Decrease emphasis: – Bioenergy/Biofuels – Thermosetting polymers/surface adherents – Adaptive, self-healing

A novel method for in-situ monitoring of local voltage, temperature and humidity distributions in fuel cells using flexible multi-functional micro sensors.

PubMed

Lee, Chi-Yuan; Fan, Wei-Yuan; Chang, Chih-Ping

2011-01-01

In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchange membrane fuel cell (PEMFC) and used to simultaneously measure variations in the inner voltage, temperature and humidity. The accuracy and reproducibility of the calibrated results obtained using the proposed micro sensors is excellent. The experimental results indicate that, at high current density and 100%RH or 75%RH, the relative humidity midstream and downstream saturates due to severe flooding. The performance of the PEM fuel cell can be stabilized using home-made flexible multi-functional micro sensors by the in-situ monitoring of local voltage, temperature and humidity distributions within it.

A Novel Method for In-Situ Monitoring of Local Voltage, Temperature and Humidity Distributions in Fuel Cells Using Flexible Multi-Functional Micro Sensors

PubMed Central

Lee, Chi-Yuan; Fan, Wei-Yuan; Chang, Chih-Ping

2011-01-01

In this investigation, micro voltage, temperature and humidity sensors were fabricated and integrated for the first time on a stainless steel foil using micro-electro-mechanical systems (MEMS). These flexible multi-functional micro sensors have the advantages of high temperature resistance, flexibility, smallness, high sensitivity and precision of location. They were embedded in a proton exchange membrane fuel cell (PEMFC) and used to simultaneously measure variations in the inner voltage, temperature and humidity. The accuracy and reproducibility of the calibrated results obtained using the proposed micro sensors is excellent. The experimental results indicate that, at high current density and 100%RH or 75%RH, the relative humidity midstream and downstream saturates due to severe flooding. The performance of the PEM fuel cell can be stabilized using home-made flexible multi-functional micro sensors by the in-situ monitoring of local voltage, temperature and humidity distributions within it. PMID:22319361

Cost-effective MEMS piezoresistive cantilever-based sensor fabrication for gait movement analysis

NASA Astrophysics Data System (ADS)

Saadon, Salem; Anuar, A. F. M.; Wahab, Yufridin

2017-03-01

The conventional photolithography of crystalline silicon technique is limited to two-dimensional and structure scaling. It's also requiring a lot of time and chemical involves for the whole process. These problems can be overcome by using laser micromachining technique, that capable to produce three-dimensional structure and simultaneously avoiding the photo mask needs. In this paper, we reported on the RapidX-250 Excimer laser micromachining with 248 nm KrF to create in-time mask design and assisting in the fabrication process of piezo-resistive micro cantilever structures. Firstly, laser micromachining parameters have been investigated in order to fabricate the acceleration sensor to analyzing human gait movement. Preliminary result shows that the fabricated sensor able to define the movement difference of human motion regarding the electrical characteristic of piezo-resistor.

A Comprehensive Study of a Micro-Channel Heat Sink Using Integrated Thin-Film Temperature Sensors

PubMed Central

Wang, Tao; Wang, Jiejun; He, Jian; Wu, Chuangui; Luo, Wenbo; Shuai, Yao; Zhang, Wanli; Chen, Xiancai; Zhang, Jian; Lin, Jia

2018-01-01

A micro-channel heat sink is a promising cooling method for high power integrated circuits (IC). However, the understanding of such a micro-channel device is not sufficient, because the tools for studying it are very limited. The details inside the micro-channels are not readily available. In this letter, a micro-channel heat sink is comprehensively studied using the integrated temperature sensors. The highly sensitive thin film temperature sensors can accurately monitor the temperature change in the micro-channel in real time. The outstanding heat dissipation performance of the micro-channel heat sink is proven in terms of maximum temperature, cooling speed and heat resistance. The temperature profile along the micro-channel is extracted, and even small temperature perturbations can be detected. The heat source formed temperature peak shifts towards the flow direction with the increasing flow rate. However, the temperature non-uniformity is independent of flow rate, but solely dependent on the heating power. Specific designs for minimizing the temperature non-uniformity are necessary. In addition, the experimental results from the integrated temperature sensors match the simulation results well. This can be used to directly verify the modeling results, helping to build a convincing simulation model. The integrated sensor could be a powerful tool for studying the micro-channel based heat sink. PMID:29351248

A Comprehensive Study of a Micro-Channel Heat Sink Using Integrated Thin-Film Temperature Sensors.

PubMed

Wang, Tao; Wang, Jiejun; He, Jian; Wu, Chuangui; Luo, Wenbo; Shuai, Yao; Zhang, Wanli; Chen, Xiancai; Zhang, Jian; Lin, Jia

2018-01-19

A micro-channel heat sink is a promising cooling method for high power integrated circuits (IC). However, the understanding of such a micro-channel device is not sufficient, because the tools for studying it are very limited. The details inside the micro-channels are not readily available. In this letter, a micro-channel heat sink is comprehensively studied using the integrated temperature sensors. The highly sensitive thin film temperature sensors can accurately monitor the temperature change in the micro-channel in real time. The outstanding heat dissipation performance of the micro-channel heat sink is proven in terms of maximum temperature, cooling speed and heat resistance. The temperature profile along the micro-channel is extracted, and even small temperature perturbations can be detected. The heat source formed temperature peak shifts towards the flow direction with the increasing flow rate. However, the temperature non-uniformity is independent of flow rate, but solely dependent on the heating power. Specific designs for minimizing the temperature non-uniformity are necessary. In addition, the experimental results from the integrated temperature sensors match the simulation results well. This can be used to directly verify the modeling results, helping to build a convincing simulation model. The integrated sensor could be a powerful tool for studying the micro-channel based heat sink.

Effect of Substrate Roughness on Adhesion and Structural Properties of Ti-Ni Shape Memory Alloy Thin Film.

PubMed

Kim, Donghwan; Lee, Hyunsuk; Bae, Joohyeon; Jeong, Hyomin; Choi, Byeongkeun; Nam, Taehyun; Noh, Jungpil

2018-09-01

Ti-Ni shape memory alloy (SMA) thin films are very attractive material for industrial and medical applications such as micro-actuator, micro-sensors, and stents for blood vessels. An important property besides shape memory effect in the application of SMA thin films is the adhesion between the film and the substrate. When using thin films as micro-actuators or micro-sensors in MEMS, the film must be strongly adhered to the substrate. On the other hand, when using SMA thin films in medical devices such as stents, the deposited alloy thin film must be easily separable from the substrate for efficient processing. In this study, we investigated the effect of substrate roughness on the adhesion of Ti-Ni SMA thin films, as well as the structural properties and phase-transformation behavior of the fabricated films. Ti-Ni SMA thin films were deposited onto etched glass substrates with magnetron sputtering. Radio frequency plasma was used for etching the substrate. The adhesion properties were investigated through progressive scratch test. Structural properties of the films were determined via Feld emission scanning electron microscopy, X-ray diffraction measurements (XRD) and Energy-dispersive X-ray spectroscopy analysis. Phase transformation behaviors were observed with differential scanning calorimetry and low temperature-XRD. Ti-Ni SMA thin film deposited onto rough substrate provides higher adhesive strength than smooth substrate. However the roughness of the substrate has no influence on the growth and crystallization of the Ti-Ni SMA thin films.

Design and Experimentation with Sandwich Microstructure for Catalytic Combustion-Type Gas Sensors

PubMed Central

Gu, Jun-Tao; Zhang, Yong-De; Jiang, Jin-Gang

2014-01-01

The traditional handmade catalytic combustion gas sensor has some problems such as a pairing difficulty, poor consistency, high power consumption, and not being interchangeable. To address these issues, integrated double catalytic combustion of alcohol gas sensor was designed and manufactured using silicon micro-electro-mechanical systems (MEMS) technology. The temperature field of the sensor is analyzed using the ANSYS finite element analysis method. In this work, the silicon oxide-PECVD-oxidation technique is used to manufacture a SiO2-Si3N2-SiO2 microstructure carrier with a sandwich structure, while wet etching silicon is used to form a beam structure to reduce the heat consumption. Thin-film technology is adopted to manufacture the platinum-film sensitive resistance. Nano Al2O3-ZrO-ThO is coated to format the sensor carrier, and the sensitive unit is dipped in a Pt-Pd catalyst solution to form the catalytic sensitive bridge arm. Meanwhile the uncoated catalyst carrier is considered as the reference unit, realizing an integrated chip based on a micro double bridge and forming sensors. The lines of the Pt thin-film resistance have been observed with an electronic microscope. The compensation of the sensitive material carriers and compensation materials have been analyzed using an energy spectrum. The results show that the alcohol sensor can detect a volume fraction between 0 and 4,500 × 10−6 and has good linear output characteristic. The temperature ranges from −20 to +40 °C. The humidity ranges from 30% to 85% RH. The zero output of the sensor is less than ±2.0% FS. The power consumption is ≤0.2 W, and both the response and recovery time are approximately 20 s. PMID:24625742

Fabrication of a Flexible Micro CO Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Chang, Chi-Chung; Lo, Yi-Man

2010-01-01

Integration of a reformer and a proton exchange membrane fuel cell (PEMFC) is problematic due to the presence in the gas from the reforming process of a slight amount of carbon monoxide. Carbon monoxide poisons the catalyst of the proton exchange membrane fuel cell subsequently degrading the fuel cell performance, and necessitating the sublimation of the reaction gas before supplying to fuel cells. Based on the use of micro-electro-mechanical systems (MEMS) technology to manufacture flexible micro CO sensors, this study elucidates the relation between a micro CO sensor and different SnO2 thin film thicknesses. Experimental results indicate that the sensitivity increases at temperatures ranging from 100–300 °C. Additionally, the best sensitivity is obtained at a specific temperature. For instance, the best sensitivity of SnO2 thin film thickness of 100 nm at 300 °C is 59.3%. Moreover, a flexible micro CO sensor is embedded into a micro reformer to determine the CO concentration in each part of a micro reformer in the future, demonstrating the inner reaction of a micro reformer in depth and immediate detection. PMID:22163494

Sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Chan, Pin-Cheng; Lin, Chia-Hung

2010-01-01

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06±0.005 (Ω/°C) and 0.033 pF/%RH, respectively.

Chemical Gas Sensors for Aeronautic and Space Applications 2

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Chen, L. Y.; Neudeck, P. G.; Knight, D.; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, D.; Liu, M.; Rauch, W. A.

1998-01-01

Aeronautic and Space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of most interest include launch vehicle safety monitoring emission monitoring and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensor is based on progress two types of technology: 1) Micro-machining and micro-fabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this micro-fabricated gas sensor technology make this area of sensor development a field of significant interest.

Damage Assessment of Structures an Air Force Office of Scientific Research Structural Mechanics Perspective

DTIC Science & Technology

2007-07-01

air turbulence and structural vibration , etc. Flexible load- bearing skins and reconfigurable support structures for smart and adaptive morphing...phenomena for flapping-wing micro air vehicles, the prevention and control of nonlinear and aeroelastic phenomena, energy harvesting from environmental...Embedded Ultrasonic NDE is a research project aimed at studying the Lamb wave interaction between piezoelectric wafer active sensors (PWAS) and the host

Fabrication and characterization of artificial hair cell sensor based on MWCNT-PDMS composite

NASA Astrophysics Data System (ADS)

Kim, Chi Yeon; Lee, Hyun Sup; Cho, Yo Han; Joh, Cheeyoung; Choi, Pyung; Park, Seong Jin

2011-06-01

The aim of this work is to design and fabricate a flow sensor using an artificial hair cell (AHC) inspired by biological hair cells of fish. The sensor consists of a single cilium structure with high aspect ratio and a mechanoreceptor using force sensitive resistor (FSR). The cilium structure is designed for capturing a drag force with direction due to flow field around the sensor and the mechanoreceptor is designed for sensing the drag force with direction from the cilium structure and converting it into an electric signal. The mechanoreceptor has a symmetric four electrodes to sense the drag force and its direction. To fabricate the single cilium structure with high aspect ratio, we have proposed a new design concept using a separated micro mold system (SMS) fabricated by the LIGA process. For a successful replication of the cilium structure, we used the hot embossing process with the help of a double-sided mold system. We used a composite of multiwall carbon nanotube and polydimethylsiloxane (MWCNT-PDMS). The performance of the mechanoreceptors was measured by a computer-controlled nanoindenter. We carried out several experiments with the sensor in the different flow rate and direction using the experimental test apparatus. To calibrate the sensor and calculate the velocity with direction based the signal from the sensor, we analyzed the coupled phenomena between flow field and the cilium structure to calculate the deflection of the cilium structure and the drag force applying to the cilium structure due to the flow field around sensor.

Nocturnal Visual Orientation in Flying Insects: A Benchmark for the Design of Vision-Based Sensors in Micro-Aerial Vehicles

DTIC Science & Technology

2011-03-09

anu.edu.au Nocturnal visual orientation in flying insects: a benchmark for the design of vision-based sensors in Micro-Aerial Vehicles Report...9 10 Technical horizon sensors Over the past few years, a remarkable proliferation of designs for micro-aerial vehicles (MAVs) has occurred...possible elevations, it may severely degrade the performance of sensors by local saturation. Therefore it is necessary to find a method whereby the effect

Optical fiber micro-displacement sensor using a refractive index modulation window-assisted reflection fiber taper

NASA Astrophysics Data System (ADS)

Bao, Weijia; Qiao, Xueguang; Yin, Xunli; Rong, Qiangzhou; Wang, Ruohui; Yang, Hangzhou

2017-12-01

We demonstrate a compact fiber-optic quasi-Michelson interferometer (QMI) for micro-displacement measurement. The sensor comprises a micro-structure of a reflection taper tip containing a refractive index modification (RIM) as a coupling window over the interface between core and cladding of the fiber. Femtosecond laser-based direct inscription technique is used to achieve this window inscription and to induce large refractive index change. The RIM acts as a window for the strong coupling and recoupling of core-to-cladding modes. As the core and cladding modes are reflected at the taper tip and coupled back to lead-in fiber, a well-defined interference spectrum is achieved. The spectral intensity exhibits a high micro-bending sensitivity of 4 . 94 dB / μm because of the sensitivity to bending of recoupled intensity of cladding modes. In contrast, the spectral wavelength is insensitive to bending but linearly responds to temperature. The simultaneous measurements, including power-referenced for displacement and wavelength-referenced for temperature, were achieved by selective interference dip monitoring.

Applications of a nanocomposite-inspired in-situ broadband ultrasonic sensor to acousto-ultrasonics-based passive and active structural health monitoring.

PubMed

Liu, Menglong; Zeng, Zhihui; Xu, Hao; Liao, Yaozhong; Zhou, Limin; Zhang, Zhong; Su, Zhongqing

2017-07-01

A novel nanocomposite-inspired in-situ broadband ultrasonic sensor previously developed, with carbon black as the nanofiller and polyvinylidene fluoride as the matrix, was networked for acousto-ultrasonic wave-based passive and active structural health monitoring (SHM). Being lightweight and small, this kind of sensor was proven to be capable of perceiving strain perturbation in virtue of the tunneling effect in the formed nanofiller conductive network when acousto-ultrasonic waves traverse the sensor. Proof-of-concept validation was implemented, to examine the sensor performance in responding to acousto-ultrasonic waves in a broad frequency regime: from acoustic emission (AE) of lower frequencies to guided ultrasonic waves (GUWs) of higher frequencies. Results have demonstrated the high fidelity, ultrafast response and high sensitivity of the sensor to acousto-ultrasonic waves up to 400kHz yet with an ultra-low magnitude (of the order of micro-strain). The sensor is proven to possess sensitivity and accuracy comparable with commercial piezoelectric ultrasonic transducers, whereas with greater flexibility in accommodating curved structural surfaces. Application paradigms of using the sensor for damage evaluation have spotlighted the capability of the sensor in compromising "sensing cost" with "sensing effectiveness" for passive AE- or active GUW-based SHM. Copyright © 2017 Elsevier B.V. All rights reserved.

Strategies for Improving the Performance of Sensors Based on Organic Field-Effect Transistors.

PubMed

Wu, Xiaohan; Mao, Shun; Chen, Junhong; Huang, Jia

2018-04-01

Organic semiconductors (OSCs) have been extensively studied as sensing channel materials in field-effect transistors due to their unique charge transport properties. Stimulation caused by its environmental conditions can readily change the charge-carrier density and mobility of OSCs. Organic field-effect transistors (OFETs) can act as both signal transducers and signal amplifiers, which greatly simplifies the device structure. Over the past decades, various sensors based on OFETs have been developed, including physical sensors, chemical sensors, biosensors, and integrated sensor arrays with advanced functionalities. However, the performance of OFET-based sensors still needs to be improved to meet the requirements from various practical applications, such as high sensitivity, high selectivity, and rapid response speed. Tailoring molecular structures and micro/nanofilm structures of OSCs is a vital strategy for achieving better sensing performance. Modification of the dielectric layer and the semiconductor/dielectric interface is another approach for improving the sensor performance. Moreover, advanced sensory functionalities have been achieved by developing integrated device arrays. Here, a brief review of strategies used for improving the performance of OFET sensors is presented, which is expected to inspire and provide guidance for the design of future OFET sensors for various specific and practical applications. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

A Multi-Phase Based Fluid-Structure-Microfluidic interaction sensor for Aerodynamic Shear Stress

NASA Astrophysics Data System (ADS)

Hughes, Christopher; Dutta, Diganta; Bashirzadeh, Yashar; Ahmed, Kareem; Qian, Shizhi

2014-11-01

A novel innovative microfluidic shear stress sensor is developed for measuring shear stress through multi-phase fluid-structure-microfluidic interaction. The device is composed of a microfluidic cavity filled with an electrolyte liquid. Inside the cavity, two electrodes make electrochemical velocimetry measurements of the induced convection. The cavity is sealed with a flexible superhydrophobic membrane. The membrane will dynamically stretch and flex as a result of direct shear cross-flow interaction with the seal structure, forming instability wave modes and inducing fluid motion within the microfluidic cavity. The shear stress on the membrane is measured by sensing the induced convection generated by membrane deflections. The advantages of the sensor over current MEMS based shear stress sensor technology are: a simplified design with no moving parts, optimum relationship between size and sensitivity, no gaps such as those created by micromachining sensors in MEMS processes. We present the findings of a feasibility study of the proposed sensor including wind-tunnel tests, microPIV measurements, electrochemical velocimetry, and simulation data results. The study investigates the sensor in the supersonic and subsonic flow regimes. Supported by a NASA SBIR phase 1 contract.

Structurally Efficient Anisotropic Organized Reticulated structures for Cooling of Electronics and Sensors

DTIC Science & Technology

2006-08-31

Chang and You [19971 and Mukherjee and Mudawar [20031. For each experiment, data is collected by varying the heat flux from high to low. This is...Science", Vol. 20, 1965, pp. 237-246. Mukherjee, S., and Mudawar , I., 2003, "Smart Pumpless Loop for Micro-Channel Electronic Cooling Using Flat and

Micro-Inspector Spacecraft Testbed: Breadboard Subsystem Demonstrations

NASA Astrophysics Data System (ADS)

Mueller, Juergen; Goldberg, Hannah; Alkalai, Leon

2007-01-01

Micro-inspector is a 5-kg inspection platform designed to operate autonomously following operator up-linked command sequences around a host spacecraft to perform safety inspections, anomaly inspections, or imaging of large in-space assemblies as envisioned for future NASA exploration missions. Similarly, such an inspection platform may be adapted to military space missions. Micro-inspector relies on solar power and using celestial sensors for navigation, giving the system large flexibility in the missions and applications it may serve, including those beyond Earth orbit. Micro-Inspector, through its small size and low weight, poses minimal design impacts to the host. Its small size and weight also affords micro-inspector to be disposable, allowing multiple inspectors to be used by a single host for different inspection routines or as emergency back-up. Its low-pressure butane propulsion system combines safety and compactness through liquid propellant storage with an adequate performance of up to 30 m/s for inspection maneuvers around the host. Micro-inspector, since power limited through a body mounted solar array, thus avoiding the complexities of deployable structures, relies on many advanced, ultra-low power micro-technologies, such as a novel microvalve by VACCO Industries in its propulsion system, electrochromic surface modulating heat transfer from the spacecraft using no moving parts, low power dual processor and FPGA-based reconfigurable and SEU mitigating avionics, a low power RF telecom link based on the Mars Micro Transceiver, and micro attitude control sensors, such as commercial micro IMUs and a JPL developed micro sun sensor. Host safety is a key concern, and multiple safety features are employed by micro-inspector to prevent any accidental impact onto the host. Among these is an active, laser-based range-finding collision avoidance system, which constantly monitors the distance to the host and via the micro-inspector's control system maintains a safe distance. Micro-Inspector design, through funding from the NASA Explorations Systems Mission Directorate, has significantly advanced over the past year and is currently at PDR level and beyond. Special emphasis was placed on retiring risk in various subsystem areas through the use of advanced technologies. To this end, a micro-inspector test bed was set up to critically assess the readiness of component technologies and subsystems. Breadboard subsystem demonstrations and system integration were performed to place future design efforts on a solid basis.

Tilt performance of the ground settlement sensor configured in a fiber-optic low-coherent interferometer.

PubMed

Zhang, Pinglei; Wei, Heming; Guo, Jingjing; Sun, Changsen

2016-10-01

Ground settlement (GS) is one of the causes that destroy the durability of reinforced concrete structures. It could lead to a deterioration in the structural basement and increase the risk of collapse. The methods used for GS monitoring were mostly electronic-based sensors for reading the changes in resistance, resonant frequencies, etc. These sensors often bear low accuracy in the long term. Our published work demonstrated that a fiber-optic low-coherent interferometer configured in a Michelson interferometer was designed as a GS sensor, and a micro-meter resolution in the room environment was approached. However, the designed GS sensor, which in principle is based on a hydraulic connecting vessel, has to suffer from a tilt degeneration problem due to a strictly vertical requirement in practical installment. Here, we made a design for the GS sensor based on its robust tilt performance. The experimental tests show that the sensor can work well within a ±5° tilt. This could meet the requirements in most designed GS sensor installment applications.

Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits.

PubMed

Wei, Chia-Ling; Lin, Yu-Chen; Chen, Tse-An; Lin, Ren-Yi; Liu, Tin-Hao

2015-02-01

An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change.

A Triple-Mode Flexible E-Skin Sensor Interface for Multi-Purpose Wearable Applications

PubMed Central

Kim, Sung-Woo; Lee, Youngoh; Park, Jonghwa; Kim, Seungmok; Chae, Heeyoung; Ko, Hyunhyub

2017-01-01

This study presents a flexible wireless electronic skin (e-skin) sensor system that includes a multi-functional sensor device, a triple-mode reconfigurable readout integrated circuit (ROIC), and a mobile monitoring interface. The e-skin device’s multi-functionality is achieved by an interlocked micro-dome array structure that uses a polyvinylidene fluoride and reduced graphene oxide (PVDF/RGO) composite material that is inspired by the structure and functions of the human fingertip. For multi-functional implementation, the proposed triple-mode ROIC is reconfigured to support piezoelectric, piezoresistance, and pyroelectric interfaces through single-type e-skin sensor devices. A flexible system prototype was developed and experimentally verified to provide various wireless wearable sensing functions—including pulse wave, voice, chewing/swallowing, breathing, knee movements, and temperature—while their real-time sensed data are displayed on a smartphone. PMID:29286312

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1994-01-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1994-11-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 4 figs.

Laser ablation for membrane processing of AlGaN/GaN- and micro structured ferroelectric thin film MEMS and SiC pressure sensors for extreme conditions

NASA Astrophysics Data System (ADS)

Zehetner, J.; Vanko, G.; Dzuba, J.; Ryger, I.; Lalinsky, T.; Benkler, Manuel; Lucki, Michal

2015-05-01

AlGaN/GaN based high electron mobility transistors (HEMTs), Schottky diodes and/or resistors have been presented as sensing devices for mechanical or chemical sensors operating in extreme conditions. In addition we investigate ferroelectric thin films for integration into micro-electro-mechanical-systems (MEMS). Creation of appropriate diaphragms and/or cantilevers out of SiC is necessary for further improvement of sensing properties of such MEMS sensors. For example sensitivity of the AlGaN/GaN based MEMS pressure sensor can be modified by membrane thickness. We demonstrated that a 4H-SiC 80μm thick diaphragms can be fabricated much faster with laser ablation than by electrochemical, photochemical or reactive ion etching (RIE). We were able to verify the feasibility of this process by fabrication of micromechanical membrane structures also in bulk 3C-SiC, borosilicate glass, sapphire and Al2O3 ceramic substrates by femtosecond laser (520nm) ablation. On a 350μm thick 4H-SiC substrate we produced an array of 275μm deep and 1000μm to 3000μm of diameter blind holes without damaging the 2μm AlN layer at the back side. In addition we investigated ferroelectric thin films as they can be deposited and micro-patterned by a direct UV-lithography method after the ablation process for a specific membrane design. The risk to harm or damage the function of thin films was eliminated by that means. Some defects in the ablated membranes are also affected by the polarisation of the laser light. Ripple structures oriented perpendicular to the laser polarisation promote creation of pin holes which would perforate a thin membrane. We developed an ablation technique strongly inhibiting formation of ripples and pin poles.

Performance of an untethered micro-optical pressure sensor

NASA Astrophysics Data System (ADS)

Ioppolo, Tindaro; Manzo, Maurizio; Krueger, Paul

2012-11-01

We present analytical and computational studies of the performance of a novel untethered micro-optical pressure sensor for fluid dynamics measurements. In particular, resolution and dynamic range will be presented. The sensor concept is based on the whispering galley mode (WGM) shifts that are observed in micro-scale dielectric optical cavities. A micro-spherical optical cavity (liquid or solid) is embedded in a thin polymeric sheet. The applied external pressure perturbs the morphology of the optical cavity leading to a shift in its optical resonances. The optical sensors are interrogated remotely, by embedding quantum dots or fluorescent dye in the micro-optical cavity. This allows a free space coupling of excitation and monitoring of the optical modes without the need of optical fibers or other cabling. With appropriate excitation and monitoring equipment, the micro-scale sensors can be distributed over a surface (e.g., including flexible biological surfaces) to monitor the local pressure field. We acknowledge the financial support from the National Science Foundation through grant CBET-1133876 with Dr. Horst Henning Winter as the program director.

High-precision micro-displacement optical-fiber sensor based on surface plasmon resonance.

PubMed

Zhu, Zongda; Liu, Lu; Liu, Zhihai; Zhang, Yu; Zhang, Yaxun

2017-05-15

We propose and demonstrate a novel optical-fiber micro-displacement sensor based on surface plasmon resonance (SPR) by fabricating a Kretschmann configuration on graded-index multimode fiber (GIMMF). We employ a single-mode fiber to change the radial position of the incident beam as the displacement. In the GIMMF, the angle between the light beam and fiber axis, which is closely related to the resonance angle, is changed by the displacement; thus, the resonance wavelength of the fiber SPR shifts. This micro-displacement fiber sensor has a wide detection range of 0-25 μm, a high sensitivity with maximum up to 10.32 nm/μm, and a nanometer resolution with minimum to 2 nm, which transcends almost all of other optical-fiber micro-displacement sensors. In addition, we also research that increasing the fiber polishing angle or medium refractive index can improve the sensitivity. This micro-displacement sensor will have a great significance in many industrial applications and provide a neoteric, rapid, and accurate optical measurement method in micro-displacement.

Validation of a new micro-manometer pressure sensor for cardiovascular measurements in mice.

PubMed

Trevino, Rodolfo J; Jones, Douglas L; Escobedo, Daniel; Porterfield, John; Larson, Erik; Chisholm, Gary B; Barton, Amanda; Feldman, Marc D

2010-01-01

Abstract The Scisense (London, ON, Canada) micro-manometer pressure sensor is currently being used by investigators to evaluate cardiovascular physiology in mice, but has not been validated to date. The purpose of the current study is to compare the 1.2 F Scisense pressure sensor to the current gold standard produced by Millar Instruments (Houston, TX) (1.4 F). In vitro comparisons were preformed including temperature drift, frequency response analysis up to 250 Hz, and damping coefficient and natural frequency determined via a pop test. The authors also performed in vivo comparisons including pressure drift, dose-response studies to IV isoproterenol, maximum adrenergic stimulation with IV dobutamine, and simultaneous placement of both micro-manometer pressure sensors in the same intact murine hearts. The authors conclude that both sensors are equivalent, and that the Scisense pressure sensor represents an alternative to the current gold standard, the Millar micro-manometer pressure sensor for in vivo pressure measurements in the mouse.

Direct laser writing of polymer micro-ring resonator ultrasonic sensors

NASA Astrophysics Data System (ADS)

Wei, Heming; Krishnaswamy, Sridhar

2017-04-01

With the development of photoacoustic technology in recent years, ultrasound-related sensors play a vital role in a number of areas ranging from scientific research to nondestructive testing. Compared with the traditional PZT transducer as ultrasonic sensors, novel ultrasonic sensors based on optical methods such as micro-ring resonators have gained increasing attention. The total internal reflection of the light along the cavity results in light propagating in microcavities as whispering gallery modes (WGMs), which are extremely sensitive to change in the radius and refractive index of the cavity induced by ultrasound strain field. In this work, we present a polymer optical micro-ring resonator based ultrasonic sensor fabricated by direct laser writing optical lithography. The design consists of a single micro-ring and a straight tapered waveguide that can be directly coupled by single mode fibers (SMFs). The design and fabrication of the printed polymer resonator have been optimized to provide broad bandwidth and high optical quality factor to ensure high detection sensitivity. The experiments demonstrate the potential of the polymer micro-ring resonator to works as a high-performance ultrasonic sensor.

Micro-ring sensor used in the diagnosis of gastric cancer

NASA Astrophysics Data System (ADS)

Shi, Sichao; Cheng, Qing; Lin, Rong; Su, Da; Huang, Ying

2016-01-01

To find a detecting method that can be applied to the clinical screening and diagnosis, the cascaded micro-ring sensor with Vernier effect was used to distinguish gastric cancerous and normal cells. The simulation by FDTD of the cascaded microring sensor with different refractive indexes of the analyte (normal cells and gastric cancer cells) will be presented. In the simulation, with the refractive index's change Δn=0.02 for the two different analyte, the shift of sensor's resonant wavelength is 6.71nm. And the cascaded micro-ring sensor's sensitivity S is 335.5nm/RIU, and it is much larger compared to 19nm/RIU for a single ring sensor.

Development of autonomous multirotor platform for exploration missions

NASA Astrophysics Data System (ADS)

Czyba, Roman; Janik, Marcin; Kurgan, Oliver; Niezabitowski, Michał; Nocoń, Marek

2016-06-01

This paper outlines development process of unmanned multirotor aerial vehicle HF-4X, which consists of design and manufacturing semi-autonomous UAV dedicated for indoor flight, which would be capable of stable and controllable mission flight. A micro air vehicle was designed to participate in the International Micro Air Vehicle Conference and Flight Competition. In this paper much attention was paid to the structure of flight control system, stabilization algorithms, analysis of IMU sensors, fusion algorithms.

Development of autonomous multirotor platform for exploration missions

DOE Office of Scientific and Technical Information (OSTI.GOV)

Czyba, Roman; Janik, Marcin; Kurgan, Oliver

This paper outlines development process of unmanned multirotor aerial vehicle HF-4X, which consists of design and manufacturing semi-autonomous UAV dedicated for indoor flight, which would be capable of stable and controllable mission flight. A micro air vehicle was designed to participate in the International Micro Air Vehicle Conference and Flight Competition. In this paper much attention was paid to the structure of flight control system, stabilization algorithms, analysis of IMU sensors, fusion algorithms.

Design and Characterization of a Sensorized Microfluidic Cell-Culture System with Electro-Thermal Micro-Pumps and Sensors for Cell Adhesion, Oxygen, and pH on a Glass Chip.

PubMed

Bonk, Sebastian M; Stubbe, Marco; Buehler, Sebastian M; Tautorat, Carsten; Baumann, Werner; Klinkenberg, Ernst-Dieter; Gimsa, Jan

2015-07-30

We combined a multi-sensor glass-chip with a microfluidic channel grid for the characterization of cellular behavior. The grid was imprinted in poly-dimethyl-siloxane. Mouse-embryonal/fetal calvaria fibroblasts (MC3T3-E1) were used as a model system. Thin-film platinum (Pt) sensors for respiration (amperometric oxygen electrode), acidification (potentiometric pH electrodes) and cell adhesion (interdigitated-electrodes structures, IDES) allowed us to monitor cell-physiological parameters as well as the cell-spreading behavior. Two on-chip electro-thermal micro-pumps (ETμPs) permitted the induction of medium flow in the system, e.g., for medium mixing and drug delivery. The glass-wafer technology ensured the microscopic observability of the on-chip cell culture. Connecting Pt structures were passivated by a 1.2 μm layer of silicon nitride (Si3N4). Thin Si3N4 layers (20 nm or 60 nm) were used as the sensitive material of the pH electrodes. These electrodes showed a linear behavior in the pH range from 4 to 9, with a sensitivity of up to 39 mV per pH step. The oxygen sensors were circular Pt electrodes with a sensor area of 78.5 μm(2). Their sensitivity was 100 pA per 1% oxygen increase in the range from 0% to 21% oxygen (air saturated). Two different IDES geometries with 30- and 50-μm finger spacings showed comparable sensitivities in detecting the proliferation rate of MC3T3 cells. These cells were cultured for 11 days in vitro to test the biocompatibility, microfluidics and electric sensors of our system under standard laboratory conditions.

A micro oxygen sensor based on a nano sol-gel TiO2 thin film.

PubMed

Wang, Hairong; Chen, Lei; Wang, Jiaxin; Sun, Quantao; Zhao, Yulong

2014-09-03

An oxygen gas microsensor based on nanostructured sol-gel TiO2 thin films with a buried Pd layer was developed on a silicon substrate. The nanostructured titania thin films for O2 sensors were prepared by the sol-gel process and became anatase after heat treatment. A sandwich TiO2 square board with an area of 350 μm × 350 μm was defined by both wet etching and dry etching processes and the wet one was applied in the final process due to its advantages of easy control for the final structure. A pair of 150 nm Pt micro interdigitated electrodes with 50 nm Ti buffer layer was fabricated on the board by a lift-off process. The sensor chip was tested in a furnace with changing the O2 concentration from 1.0% to 20% by monitoring its electrical resistance. Results showed that after several testing cycles the sensor's output becomes stable, and its sensitivity is 0.054 with deviation 2.65 × 10(-4) and hysteresis is 8.5%. Due to its simple fabrication process, the sensor has potential for application in environmental monitoring, where lower power consumption and small size are required.

Micro-optics technology and sensor systems applications

NASA Technical Reports Server (NTRS)

Gal, George; Herman, B.; Anderson, W.; Whitney, R.; Morrow, H.

1993-01-01

The current generation of electro-optical sensors utilizing refractive and reflective optical elements require sophisticated, complex, and expensive designs. Advanced-technology-based electro-optical sensors of minimum size and weight require miniaturization of optical, electrical, and mechanical devices with an increasing trend toward integration of various components. Micro-optics technology has the potential in a number of areas to simplify optical design with improved performance. This includes internally cooled apertures, hybrid optical design, microlenses, dispersive multicolor microlenses, active dither, electronically controlled optical beam steer, and microscopic integration of micro-optics, detectors, and signal processing layers. This paper describes our approach to the development of micro-optics technology with our main emphasis for sensors applications.

Micro-light-pipe array with an excitation attenuation filter for lensless digital enzyme-linked immunosorbent assay

NASA Astrophysics Data System (ADS)

Takehara, Hironari; Nagasaki, Mizuki; Sasagawa, Kiyotaka; Takehara, Hiroaki; Noda, Toshihiko; Tokuda, Takashi; Ohta, Jun

2016-03-01

Digital enzyme-linked immunosorbent assay (ELISA) is used for detecting various biomarkers with hypersensitivity. We have been developing compact systems by replacing the fluorescence microscope with a CMOS image sensor. Here, we propose a micro-light-pipe array structure made of metal filled with dye-doped resin, which can be used as a fabrication substrate of the micro-reaction-chamber array of digital ELISA. The possibility that this structure enhances the coupling efficiency for fluorescence was simulated using a simple model. To realize the structure, we fabricated a 30-µm-thick micropipe array by copper electroplating around a thick photoresist pattern. The typical diameter of each fabricated micropipe was 10 µm. The pipes were filled with yellow-dye-doped epoxy resin. The transmittance ratio of fluorescence and excitation light could be controlled by adjusting the doping concentration. We confirmed that an angled excitation light incidence suppressed the leakage of excitation light.

Automatic monitoring of ecosystem structure and functions using integrated low-cost near surface sensors

NASA Astrophysics Data System (ADS)

Kim, J.; Ryu, Y.; Jiang, C.; Hwang, Y.

2016-12-01

Near surface sensors are able to acquire more reliable and detailed information with higher temporal resolution than satellite observations. Conventional near surface sensors usually work individually, and thus they require considerable manpower from data collection through information extraction and sharing. Recent advances of Internet of Things (IoT) provides unprecedented opportunities to integrate various low-cost sensors as an intelligent near surface observation system for monitoring ecosystem structure and functions. In this study, we developed a Smart Surface Sensing System (4S), which can automatically collect, transfer, process and analyze data, and then publish time series results on public-available website. The system is composed of micro-computer Raspberry pi, micro-controller Arduino, multi-spectral spectrometers made from Light Emitting Diode (LED), visible and near infrared cameras, and Internet module. All components are connected with each other and Raspberry pi intelligently controls the automatic data production chain. We did intensive tests and calibrations in-lab. Then, we conducted in-situ observations at a rice paddy field and a deciduous broadleaf forest. During the whole growth season, 4S obtained landscape images, spectral reflectance in red, green, blue, and near infrared, normalized difference vegetation index (NDVI), fraction of photosynthetically active radiation (fPAR), and leaf area index (LAI) continuously. Also We compared 4S data with other independent measurements. NDVI obtained from 4S agreed well with Jaz hyperspectrometer at both diurnal and seasonal scales (R2 = 0.92, RMSE = 0.059), and 4S derived fPAR and LAI were comparable to LAI-2200 and destructive measurements in both magnitude and seasonal trajectory. We believe that the integrated low-cost near surface sensor could help research community monitoring ecosystem structure and functions closer and easier through a network system.

Innovative multi-cantilever array sensor system with MOEMS read-out

NASA Astrophysics Data System (ADS)

Ivaldi, F.; Bieniek, T.; Janus, P.; Grabiec, P.; Majstrzyk, W.; Kopiec, D.; Gotszalk, T.

2016-11-01

Cantilever based sensor system are a well-established sensor family exploited in several every-day life applications as well as in high-end research areas. The very high sensitivity of such systems and the possibility to design and functionalize the cantilevers to create purpose built and highly selective sensors have increased the interest of the scientific community and the industry in further exploiting this promising sensors type. Optical deflection detection systems for cantilever sensors provide a reliable, flexible method for reading information from cantilevers with the highest sensitivity. However the need of using multi-cantilever arrays in several fields of application such as medicine, biology or safety related areas, make the optical method less suitable due to its structural complexity. Working in the frame of a the Joint Undertaking project Lab4MEMS II our group proposes a novel and innovative approach to solve this issue, by integrating a Micro-Opto-Electro-Mechanical-System (MOEMS) with dedicated optics, electronics and software with a MOEMS micro-mirror, ultimately developed in the frame of Lab4MEMSII. In this way we are able to present a closely packed, lightweight solution combining the advantages of standard optical read-out systems with the possibility of recording multiple read-outs from large cantilever arrays quasi simultaneously.

Micro-machined resonator oscillator

DOEpatents

Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

1994-01-01

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

Development of chipscale chalcogenide glass based infrared chemical sensors

NASA Astrophysics Data System (ADS)

Hu, Juejun; Musgraves, J. David; Carlie, Nathan; Zdyrko, Bogdan; Luzinov, Igor; Agarwal, Anu; Richardson, Kathleen; Kimerling, Lionel

2011-01-01

In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.

Dynamics, Control, and Fabrication of Micro Embedded Heaters and Sensors for Micro SMA Active Endoscopes

NASA Astrophysics Data System (ADS)

Aphanuphong, Sutha

This research investigates design and control of an active catheter for minimally invasive medical procedures. Microfabrication techniques are developed and several prototypes were constructed. The understanding and analysis results from each design iteration are utilized to improve the overall design and the performance of each revision. An innovative co-fabrication method is explored to simplify the fabrication process and also improve the quality, repeatability, and reliability of the active catheter. This co-fabrication method enables a unique compact integrated heater and sensor film to be directly constructed on a shape memory alloy (SMA) sheet and to be utilized as an outline mask to pattern a micro SMA actuator. There are two functions integrated in the sensor film: heat sources to actuate the micro SMA actuator and sensors to provide temperature and strain of the active catheter to closed-loop control algorithms. Three main aspects are explored in this dissertation: thermal dynamics in the MicroFlex (muF) film and its effect on the sensor capabilities; non-minimum phase behavior and its effect on control performance, and film micro fabrication design and its effect on thermal dynamics. The sensor film developed from this understanding is able to deliver excellent heating and sensing performance with a simple design.

Flexible Wing Base Micro Aerial Vehicles: Micro Air Vehicles (MAVs) for Surveillance and Remote Sensor Delivery

NASA Technical Reports Server (NTRS)

Ifju, Peter

2002-01-01

Micro Air Vehicles (MAVs) will be developed for tracking individuals, locating terrorist threats, and delivering remote sensors, for surveillance and chemical/biological agent detection. The tasks are: (1) Develop robust MAV platform capable of carrying sensor payload. (2) Develop fully autonomous capabilities for delivery of sensors to remote and distant locations. The current capabilities and accomplishments are: (1) Operational electric (inaudible) 6-inch MAVs with novel flexible wing, providing superior aerodynamic efficiency and control. (2) Vision-based flight stability and control (from on-board cameras).

Development of a thick film PZT foil sensor for use in structural health monitoring applications.

PubMed

Pickwell, Andrew J; Dorey, Robert A; Mba, David

2013-02-01

Acoustic emission (AE) monitoring is a technique of growing interest in the field of nondestructive testing (NDT). The use of AE devices to monitor the health of structural components is currently limited by the cost of AE equipment, which prohibits the permanent placement of AE devices on structures for the purposes of continuous monitoring and the monitoring of areas with limited access. Micro electromechanical systems (MEMS) can provide solutions to these problems. We present the manufacture of a 4.4-μm-thick lead zirconate titanate (PZT) film on a 110-μm-thick titanium foil substrate for use as an AE sensor. The thick-film sensor is benchmarked against commercially available AE sensors in static and dynamic monitoring applications. The thick-film AE device is found to perform well in the detection of AE in static applications. A low signal-to-noise ratio is found to prohibit the detection of AE in a dynamic application.

Efficient and Robust Data Collection Using Compact Micro Hardware, Distributed Bus Architectures and Optimizing Software

NASA Technical Reports Server (NTRS)

Chau, Savio; Vatan, Farrokh; Randolph, Vincent; Baroth, Edmund C.

2006-01-01

Future In-Space propulsion systems for exploration programs will invariably require data collection from a large number of sensors. Consider the sensors needed for monitoring several vehicle systems states of health, including the collection of structural health data, over a large area. This would include the fuel tanks, habitat structure, and science containment of systems required for Lunar, Mars, or deep space exploration. Such a system would consist of several hundred or even thousands of sensors. Conventional avionics system design will require these sensors to be connected to a few Remote Health Units (RHU), which are connected to robust, micro flight computers through a serial bus. This results in a large mass of cabling and unacceptable weight. This paper first gives a survey of several techniques that may reduce the cabling mass for sensors. These techniques can be categorized into four classes: power line communication, serial sensor buses, compound serial buses, and wireless network. The power line communication approach uses the power line to carry both power and data, so that the conventional data lines can be eliminated. The serial sensor bus approach reduces most of the cabling by connecting all the sensors with a single (or redundant) serial bus. Many standard buses for industrial control and sensor buses can support several hundreds of nodes, however, have not been space qualified. Conventional avionics serial buses such as the Mil-Std-1553B bus and IEEE 1394a are space qualified but can support only a limited number of nodes. The third approach is to combine avionics buses to increase their addressability. The reliability, EMI/EMC, and flight qualification issues of wireless networks have to be addressed. Several wireless networks such as the IEEE 802.11 and Ultra Wide Band are surveyed in this paper. The placement of sensors can also affect cable mass. Excessive sensors increase the number of cables unnecessarily. Insufficient number of sensors may not provide adequate coverage of the system. This paper also discusses an optimal technique to place and validate sensors.

Dual spherical single-mode-multimode-single-mode optical fiber temperature sensor based on a Mach–Zehnder interferometer

NASA Astrophysics Data System (ADS)

Tan, Jianchang; Feng, Guoying; Zhang, Shulin; Liang, Jingchuan; Li, Wei; Luo, Yun

2018-07-01

A dual spherical single-mode-multimode-single-mode (DSSMS) optical fiber temperature sensor based on a Mach–Zehnder interferometer (MZI) was designed and implemented in this paper. Theoretical and experimental results indicated that the LP01 mode in the core and the LP09 mode excited by the spherical structure were maintained and transmitted via multimode fiber and interfered at the second spherical structure, resulting in the interference spectrum. An increase or decrease in temperature can cause significant red-shift or blue-shift of the spectrum, respectively. The linearity of the spectral shift due to the temperature change is ~0.999, the sensitivity at 30 °C–540 °C is ~37.372 pm °C‑3, and at  ‑25 °C–25 °C is ~37.28 pm °C‑1. The reproducibility error of this all-fiber temperature sensor at 30 °C–540 °C is less than 0.15%. Compared with the optical fiber sensor with a tapered structure and fiber core offset structure, this MZI-based DSSMS optical fiber temperature sensor has higher mechanical strength. Moreover, benefiting from low-cost and environmentally friendly materials, it is expected to be a novel micro-nano all-fiber sensor.

Micro-patterning and characterization of PHEMA-co-PAM-based optical chemical sensors for lab-on-a-chip applications.

PubMed

Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R; Meldrum, Deirdre R

2012-10-01

We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O(2)) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes.

GaAs-based micro/nanomechanical resonators

NASA Astrophysics Data System (ADS)

Yamaguchi, Hiroshi

2017-10-01

Micro/nanomechanical resonators have been extensively studied both for device applications, such as high-performance sensors and high-frequency devices, and for fundamental science, such as quantum physics in macroscopic objects. The advantages of GaAs-based semiconductor heterostructures include improved mechanical properties through strain engineering, highly controllable piezoelectric transduction, carrier-mediated optomechanical coupling, and hybridization with quantum low-dimensional structures. This article reviews our recent activities, as well as those of other groups, on the physics and applications of mechanical resonators fabricated using GaAs-based heterostructures.

Fish-bone-structured acoustic sensor toward silicon cochlear systems

NASA Astrophysics Data System (ADS)

Harada, Muneo; Ikeuchi, Naoki; Fukui, Shoichi; Ando, Shigeru

1998-09-01

This paper describes a micro mechanical acoustic sensor modeling the basilar membrane of the human cochlea. The skeleton of the acoustic sensor is an array of resonators each of specific frequency selectivity. The mechanical structure of the sensor is designed using FEM analysis to have a particular geometrical structure looking like a fish bone that consists of cantilever ribs extending out from a backbone. Acoustic wave is supposed to be introduced to the diaphragm placed at one end of the backbone to travel in one way along the backbone. During traveling each frequency component of the wave is delivered to the corresponding cantilever according to its resonant frequency. The mechanical vibrations of each cantilever are detected in parallel by use of piezoresistors. The fish-bone structure is fabricated to be suspended in the air on a silicon substrate using silicon micromachining technology. We observe the frequency response of each cantilever to verify fairly sharp frequency selectivity associated with the one- way flow of the vibration energy. The present results encourage us to implement the human auditory system on a silicon chip toward the goal of silicon cochlea.

Manufacture of high aspect ratio micro-pillar wall shear stress sensor arrays

NASA Astrophysics Data System (ADS)

Gnanamanickam, Ebenezer P.; Sullivan, John P.

2012-12-01

In the field of experimental fluid mechanics the measurement of unsteady, distributed wall shear stress has proved historically challenging. Recently, sensors based on an array of flexible micro-pillars have shown promise in carrying out such measurements. Similar sensors find use in other applications such as cellular mechanics. This work presents a manufacturing technique that can manufacture micro-pillar arrays of high aspect ratio. An electric discharge machine (EDM) is used to manufacture a micro-drilling tool. This micro-drilling tool is used to form holes in a wax sheet which acts as the mold for the micro-pillar array. Silicone rubber is cast in these molds to yield a micro-pillar array. Using this technique, micro-pillar arrays with a maximum aspect ratio of about 10 have been manufactured. Manufacturing issues encountered, steps to alleviate them and the potential of the process to manufacture similar micro-pillar arrays in a time-efficient manner are also discussed.

Recent Trends in Monitoring of European Water Framework Directive Priority Substances Using Micro-Sensors: A 2007–2009 Review

PubMed Central

Namour, Philippe; Lepot, Mathieu; Jaffrezic-Renault, Nicole

2010-01-01

This review discusses from a critical perspective the development of new sensors for the measurement of priority pollutants targeted in the E.U. Water Framework Directive. Significant advances are reported in the paper and their advantages and limitations are also discussed. Future perspectives in this area are also pointed out in the conclusions. This review covers publications appeared since December 2006 (the publication date of the Swift report). Among priority substances, sensors for monitoring the four WFD metals represent 81% of published papers. None of analyzed publications present a micro-sensor totally validated in laboratory, ready for tests under real conditions in the field. The researches are mainly focused on the sensing part of the micro-sensors. Nevertheless, the main factor limiting micro-sensor applications in the environment is the ruggedness of the receptor towards environmental conditions. This point constitutes the first technological obstacle to be overcome for any long-term field tests. PMID:22163635

Issues regarding the usage of MPPT techniques in micro grid systems

NASA Astrophysics Data System (ADS)

Szeidert, I.; Filip, I.; Dragan, F.; Gal, A.

2018-01-01

The main objective of the control strategies applied at hybrid micro grid systems (wind/hydro/solar), that function based on maximum power point tracking (MPPT) techniques is to improve the conversion system’s efficiency and to preserve the quality of the generated electrical energy (voltage and power factor). One of the main goals of maximum power point tracking strategy is to achieve the harvesting of the maximal possible energy within a certain time period. In order to implement the control strategies for micro grid, there are typically required specific transducers (sensor for wind speed, optical rotational transducers, etc.). In the technical literature, several variants of the MPPT techniques are presented and particularized at some applications (wind energy conversion systems, solar systems, hydro plants, micro grid hybrid systems). The maximum power point tracking implementations are mainly based on two-level architecture. The lower level controls the main variable and the superior level represents the MPPT control structure. The paper presents micro grid structures developed at Politehnica University Timisoara (PUT) within the frame of a research grant. The paper is focused on the application of MPPT strategies on hybrid micro grid systems. There are presented several structures and control strategies and are highlighted their advantages and disadvantages, together with practical implementation guidelines.

The MEMS process of a micro friction sensor

NASA Astrophysics Data System (ADS)

Yuan, Ming-Quan; Lei, Qiang; Wang, Xiong

2018-02-01

The research and testing techniques of friction sensor is an important support for hypersonic aircraft. Compared with the conventional skin friction sensor, the MEMS skin friction sensor has the advantages of small size, high sensitivity, good stability and dynamic response. The MEMS skin friction sensor can be integrated with other flow field sensors whose process is compatible with MEMS skin friction sensor to achieve multi-physical measurement of the flow field; and the micro-friction balance sensor array enable to achieve large area and accurate measurement for the near-wall flow. A MEMS skin friction sensor structure is proposed, which sensing element not directly contacted with the flow field. The MEMS fabrication process of the sensing element is described in detail. The thermal silicon oxide is used as the mask to solve the selection ratio problem of silicon DRIE. The optimized process parameters of silicon DRIE: etching power 1600W/LF power 100 W; SF6 flux 360 sccm; C4F8 flux 300 sccm; O2 flux 300 sccm. With Cr/Au mask, etch depth of glass shallow groove can be controlled in 30°C low concentration HF solution; the spray etch and wafer rotate improve the corrosion surface quality of glass shallow groove. The MEMS skin friction sensor samples were fabricated by the above MEMS process, and results show that the error of the length and width of the elastic cantilever is within 2 μm, the depth error of the shallow groove is less than 0.03 μm, and the static capacitance error is within 0.2 pF, which satisfy the design requirements.

Towards the Development of THz-Sensors for the Detection of African Trypanosomes

NASA Astrophysics Data System (ADS)

Knieß, Robert; Wagner, Carolin B.; Ulrich Göringer, H.; Mueh, Mario; Damm, Christian; Sawallich, Simon; Chmielak, Bartos; Plachetka, Ulrich; Lemme, Max

2018-03-01

Human African trypanosomiasis (HAT) is a neglected tropical disease (NTD) for which adequate therapeutic and diagnostic measures are still lacking. Causative agent of HAT is the African trypanosome, a single-cell parasite, which propagates in the blood and cerebrospinal fluid of infected patients. Although different testing methods for the pathogen exist, none is robust, reliable and cost-efficient enough to support large-scale screening and control programs. Here we propose the design of a new sensor-type for the detection of infective-stage trypanosomes. The sensor exploits the highly selective binding capacity of nucleic acid aptamers to the surface of the parasite in combination with passive sensor structures to allow an electromagnetic remote read-out using terahertz (THz)-radiation. The short wavelength provides a superior interaction with the parasite cells than longer wavelengths, which is essential for a high sensitivity. We present two different sensor structures using both, micro- and nano-scale elements, as well as different measurement principles.

Wireless thin film transistor based on micro magnetic induction coupling antenna.

PubMed

Jun, Byoung Ok; Lee, Gwang Jun; Kang, Jong Gu; Kim, Seunguk; Choi, Ji-Woong; Cha, Seung Nam; Sohn, Jung Inn; Jang, Jae Eun

2015-12-22

A wireless thin film transistor (TFT) structure in which a source/drain or a gate is connected directly to a micro antenna to receive or transmit signals or power can be an important building block, acting as an electrical switch, a rectifier or an amplifier, for various electronics as well as microelectronics, since it allows simple connection with other devices, unlike conventional wire connections. An amorphous indium gallium zinc oxide (α-IGZO) TFT with magnetic antenna structure was fabricated and studied for this purpose. To enhance the induction coupling efficiency while maintaining the same small antenna size, a magnetic core structure consisting of Ni and nanowires was formed under the antenna. With the micro-antenna connected to a source/drain or a gate of the TFT, working electrical signals were well controlled. The results demonstrated the device as an alternative solution to existing wire connections which cause a number of problems in various fields such as flexible/wearable devices, body implanted devices, micro/nano robots, and sensors for the 'internet of things' (IoT).

Wireless thin film transistor based on micro magnetic induction coupling antenna

PubMed Central

Jun, Byoung Ok; Lee, Gwang Jun; Kang, Jong Gu; Kim, Seunguk; Choi, Ji-Woong; Cha, Seung Nam; Sohn, Jung Inn; Jang, Jae Eun

2015-01-01

A wireless thin film transistor (TFT) structure in which a source/drain or a gate is connected directly to a micro antenna to receive or transmit signals or power can be an important building block, acting as an electrical switch, a rectifier or an amplifier, for various electronics as well as microelectronics, since it allows simple connection with other devices, unlike conventional wire connections. An amorphous indium gallium zinc oxide (α-IGZO) TFT with magnetic antenna structure was fabricated and studied for this purpose. To enhance the induction coupling efficiency while maintaining the same small antenna size, a magnetic core structure consisting of Ni and nanowires was formed under the antenna. With the micro-antenna connected to a source/drain or a gate of the TFT, working electrical signals were well controlled. The results demonstrated the device as an alternative solution to existing wire connections which cause a number of problems in various fields such as flexible/wearable devices, body implanted devices, micro/nano robots, and sensors for the ‘internet of things’ (IoT). PMID:26691929

Wireless thin film transistor based on micro magnetic induction coupling antenna

NASA Astrophysics Data System (ADS)

Jun, Byoung Ok; Lee, Gwang Jun; Kang, Jong Gu; Kim, Seunguk; Choi, Ji-Woong; Cha, Seung Nam; Sohn, Jung Inn; Jang, Jae Eun

2015-12-01

A wireless thin film transistor (TFT) structure in which a source/drain or a gate is connected directly to a micro antenna to receive or transmit signals or power can be an important building block, acting as an electrical switch, a rectifier or an amplifier, for various electronics as well as microelectronics, since it allows simple connection with other devices, unlike conventional wire connections. An amorphous indium gallium zinc oxide (α-IGZO) TFT with magnetic antenna structure was fabricated and studied for this purpose. To enhance the induction coupling efficiency while maintaining the same small antenna size, a magnetic core structure consisting of Ni and nanowires was formed under the antenna. With the micro-antenna connected to a source/drain or a gate of the TFT, working electrical signals were well controlled. The results demonstrated the device as an alternative solution to existing wire connections which cause a number of problems in various fields such as flexible/wearable devices, body implanted devices, micro/nano robots, and sensors for the ‘internet of things’ (IoT).

The effects of embedded piezoelectric fiber composite sensors on the structural integrity of glass-fiber-epoxy composite laminate

NASA Astrophysics Data System (ADS)

Konka, Hari P.; Wahab, M. A.; Lian, K.

2012-01-01

Piezoelectric fiber composite sensors (PFCSs) made from micro-sized lead zirconate titanate (PZT) fibers have many advantages over the traditional bulk PZT sensors for embedded sensor applications. PFCSs as embedded sensors will be an ideal choice to continuously monitor the stress/strain levels and health conditions of composite structures. PFCSs are highly flexible, easily embeddable, have high compatibility with composite structures, and also provides manufacturing flexibility. This research is focused on examining the effects of embedding PFCS sensors (macro-fiber composite (MFC) and piezoelectric fiber composite (PFC)) on the structural integrity of glass-fiber-epoxy composite laminates. The strengths of composite materials with embedded PFCSs and conventional PZT sensors were compared, and the advantages of PFCS sensors over PZTs were demonstrated. Initially a numerical simulation study is performed to understand the local stress/strain field near the embedded sensor region inside a composite specimen. High stress concentration regions were observed near the embedded sensor corner edge. Using PFCS leads to a reduction of 56% in longitudinal stress concentration and 38% in transverse stress concentration, when compared to using the conventional PZTs as embedded sensors. In-plane tensile, in-plane tension-tension fatigue, and short beam strength tests are performed to evaluate the strengths/behavior of the composite specimens containing embedded PFCS. From the tensile test it is observed that embedding PFCS and PZT sensors in the composite structures leads to a reduction in ultimate strength by 3 and 6% respectively. From the fatigue test results it is concluded that both embedded PFCS and PZT sensors do not have a significant effect on the fatigue behavior of the composite specimens. From the short beam strength test it is found that embedding PFCS and PZT sensors leads to a reduction in shear strength by 7 and 15% respectively. Overall the pure PZT sensors seem to have low compatibility with composites when compared to PFCSs.

Measurement of micro gears with a touch-trigger probe

NASA Astrophysics Data System (ADS)

Liu, YenChih; Chang, Kai-Hsiung; An, Nia-Chun; Yan, Sheng-Zhan; Tsai, Hsiu-An

2013-01-01

The measurement of micro gears with a touch-trigger probe will be introduced in this paper. Due to the small size and complex geometry of micro gears, it is difficult to measure them by traditional instruments like coordinate measuring machines (CMM) or laser displacement sensors. This study focuses on this topic and proposes an approach to measure the three dimensional profile of micro gears. The methodology is based on coordinate measurement. A special touch-trigger probe which detects the moment of contact is employed in the measuring system. The diameter of the probe tip is smaller than 2µm and therefore small enough for measuring micro structures. All the calibration and error compensation for the measuring system are discussed in the view of micro metrology. The comparison of measured profiles from both coordinate and image measurement is discussed. Results of experiments show that the proposed approach is worth of further development in the future.

Fabrication of p-n heterostructure ZnO/Si moth-eye structures: Antireflection, enhanced charge separation and photocatalytic properties

NASA Astrophysics Data System (ADS)

Zeng, Yu; Chen, XiFang; Yi, Zao; Yi, Yougen; Xu, Xibin

2018-05-01

The pyramidal silicon substrate is formed by wet etching, then ZnO nanorods are grown on the surface of the pyramidal microstructure by a hydrothermal method to form a moth-eye composite heterostructure. The composite heterostructure of this material determines its excellent anti-reflection properties and ability to absorb light from all angles. In addition, due to the effective heterojunction binding area, the composite micro/nano structure has excellent photoelectric conversion performance. Its surface structure and the large specific surface area gives the material super hydrophilicity, excellent gas sensing characteristic, and photocatalytic properties. Based on the above characteristics, the micro/nano heterostructure can be used in solar cells, sensors, light-emitting devices, and photocatalytic fields.

A self-diagnostic adhesive for monitoring bonded joints in aerospace structures

NASA Astrophysics Data System (ADS)

Zhuang, Yitao; Li, Yu-hung; Kopsaftopoulos, Fotis; Chang, Fu-Kuo

2016-04-01

Bondline integrity is still one of the most critical concerns in the design of aircraft structures up to date. Due to the lack of confidence on the integrity of the bondline both during fabrication and service, the industry standards and regulations still require assembling the composite using conventional fasteners. Furthermore, current state-of-the-art non-destructive evaluation (NDE) and structural health monitoring (SHM) techniques are incapable of offering mature solutions on the issue of bondline integrity monitoring. Therefore, the objective of this work is the development of an intelligent adhesive film with integrated micro-sensors for monitoring the integrity of the bondline interface. The proposed method makes use of an electromechanical-impedance (EMI) based method, which is a rapidly evolving approach within the SHM family. Furthermore, an innovative screen-printing technique to fabricate piezoelectric ceramic sensors with minimal thickness has been developed at Stanford. The approach presented in this study is based on the use of (i) micro screen-printed piezoelectric sensors integrated into adhesive leaving a minimal footprint on the material, (ii) numerical and analytical modeling of the EMI spectrum of the adhesive bondline, (iii) novel diagnostic algorithms for monitoring the bondline integrity based on advanced signal processing techniques, and (iv) the experimental assessment via prototype adhesively bonded structures in static (varying loads) and dynamic (fatigue) environments. The proposed method will provide a huge confidence on the use of bonded joints for aerospace structures and lead to a paradigm change in their design by enabling enormous weight savings while maximizing the economic and performance efficiency.

Micro-Structured Sapphire Fiber Sensors for Simultaneous Measurements of High-T and Dynamic Gas Pressure in Harsh Environments

DOE Office of Scientific and Technical Information (OSTI.GOV)

Xiao, Hai; Tsai, Hai-Lung; Dong, Junhang

2014-09-30

This is the final report for the program “Micro-Structured Sapphire Fiber Sensors for Simultaneous Measurements of High Temperature and Dynamic Gas Pressure in Harsh Environments”, funded by NETL, and performed by Missouri University of Science and Technology, Clemson University and University of Cincinnati from October 1, 2009 to September 30, 2014. Securing a sustainable energy economy by developing affordable and clean energy from coal and other fossil fuels is a central element to the mission of The U.S. Department of Energy’s (DOE) National Energy Technology Laboratory (NETL). To further this mission, NETL funds research and development of novel sensor technologiesmore » that can function under the extreme operating conditions often found in advanced power systems. The main objective of this research program is to conduct fundamental and applied research that will lead to successful development and demonstration of robust, multiplexed, microstructured silica and single-crystal sapphire fiber sensors to be deployed into the hot zones of advanced power and fuel systems for simultaneous measurements of high temperature and gas pressure. The specific objectives of this research program include: 1) Design, fabrication and demonstration of multiplexed, robust silica and sapphire fiber temperature and dynamic gas pressure sensors that can survive and maintain fully operational in high-temperature harsh environments. 2) Development and demonstration of a novel method to demodulate the multiplexed interferograms for simultaneous measurements of temperature and gas pressure in harsh environments. 3) Development and demonstration of novel sapphire fiber cladding and low numerical aperture (NA) excitation techniques to assure high signal integrity and sensor robustness.« less

Micro-machined resonator oscillator

DOEpatents

Koehler, D.R.; Sniegowski, J.J.; Bivens, H.M.; Wessendorf, K.O.

1994-08-16

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.

Advances in Micromechanics Modeling of Composites Structures for Structural Health Monitoring

NASA Astrophysics Data System (ADS)

Moncada, Albert

Although high performance, light-weight composites are increasingly being used in applications ranging from aircraft, rotorcraft, weapon systems and ground vehicles, the assurance of structural reliability remains a critical issue. In composites, damage is absorbed through various fracture processes, including fiber failure, matrix cracking and delamination. An important element in achieving reliable composite systems is a strong capability of assessing and inspecting physical damage of critical structural components. Installation of a robust Structural Health Monitoring (SHM) system would be very valuable in detecting the onset of composite failure. A number of major issues still require serious attention in connection with the research and development aspects of sensor-integrated reliable SHM systems for composite structures. In particular, the sensitivity of currently available sensor systems does not allow detection of micro level damage; this limits the capability of data driven SHM systems. As a fundamental layer in SHM, modeling can provide in-depth information on material and structural behavior for sensing and detection, as well as data for learning algorithms. This dissertation focuses on the development of a multiscale analysis framework, which is used to detect various forms of damage in complex composite structures. A generalized method of cells based micromechanics analysis, as implemented in NASA's MAC/GMC code, is used for the micro-level analysis. First, a baseline study of MAC/GMC is performed to determine the governing failure theories that best capture the damage progression. The deficiencies associated with various layups and loading conditions are addressed. In most micromechanics analysis, a representative unit cell (RUC) with a common fiber packing arrangement is used. The effect of variation in this arrangement within the RUC has been studied and results indicate this variation influences the macro-scale effective material properties and failure stresses. The developed model has been used to simulate impact damage in a composite beam and an airfoil structure. The model data was verified through active interrogation using piezoelectric sensors. The multiscale model was further extended to develop a coupled damage and wave attenuation model, which was used to study different damage states such as fiber-matrix debonding in composite structures with surface bonded piezoelectric sensors.

Electrochemical determination of nitrate with nitrate reductase-immobilized electrodes under ambient air.

PubMed

Quan, De; Shim, Jun Ho; Kim, Jong Dae; Park, Hyung Soo; Cha, Geun Sig; Nam, Hakhyun

2005-07-15

Nitrate monitoring biosensors were prepared by immobilizing nitrate reductase derived from yeast on a glassy carbon electrode (GCE, d = 3 mm) or screen-printed carbon paste electrode (SPCE, d = 3 mm) using a polymer (poly(vinyl alcohol)) entrapment method. The sensor could directly determine the nitrate in an unpurged aqueous solution with the aid of an appropriate oxygen scavenger: the nitrate reduction reaction driven by the enzyme and an electron-transfer mediator, methyl viologen, at -0.85 V (GCE vs Ag/AgCl) or at -0.90 V (SPCE vs Ag/AgCl) exhibited no oxygen interference in a sulfite-added solution. The electroanalytical properties of optimized biosensors were measured: the sensitivity, linear response range, and detection limit of the sensors based on GCE were 7.3 nA/microM, 15-300 microM (r2 = 0.995), and 4.1 microM (S/N = 3), respectively, and those of SPCE were 5.5 nA/microM, 15-250 microM (r2 = 0.996), and 5.5 microM (S/N = 3), respectively. The disposable SPCE-based biosensor with a built-in well- or capillary-type sample cell provided high sensor-to-sensor reproducibility (RSD < 3.4% below 250 microM) and could be used more than one month in normal room-temperature storage condition. The utility of the proposed sensor system was demonstrated by determining nitrate in real samples.

Rhodamine spirolactam sensors operated by sulfur-cooperated metal complexation

NASA Astrophysics Data System (ADS)

Heo, Gisuk; Lee, Dahye; Kim, Chi Gwan; Do, Jung Yun

2018-01-01

New rhodamine Schiff base sensors were developed to improve selective sensing by introducing sulfide, ester, and dithiocarbonate groups, as well as using ketones coupled to rhodamine-hydrazine. Metal sensing proceeded through the 1:1 complexation of the metal ion for most sensors in the presence of Cu2 + and Hg2 +. A sensor carrying a dithiocarbonate group responded selectively to Hg2 + showing a strong colorimetric change and intense fluorescence. The association constants of the sensors were determined from a linear plot performed at micro-molar concentrations to afford values in the range of 104. Sensing was interrupted at the initial time of Hg2 + exposure due to the isomerization of imine and preferential metal bonding of two dithiocarbonate groups regardless of the main structure of rhodamine. The sensors exhibited the reversible and reproducible performance for Hg2 + sensing.

Fully Self-Contained Vision-Aided Navigation and Landing of a Micro Air Vehicle Independent from External Sensor Inputs

NASA Technical Reports Server (NTRS)

Brockers, Roland; Susca, Sara; Zhu, David; Matthies, Larry

2012-01-01

Direct-lift micro air vehicles have important applications in reconnaissance. In order to conduct persistent surveillance in urban environments, it is essential that these systems can perform autonomous landing maneuvers on elevated surfaces that provide high vantage points without the help of any external sensor and with a fully contained on-board software solution. In this paper, we present a micro air vehicle that uses vision feedback from a single down looking camera to navigate autonomously and detect an elevated landing platform as a surrogate for a roof top. Our method requires no special preparation (labels or markers) of the landing location. Rather, leveraging the planar character of urban structure, the landing platform detection system uses a planar homography decomposition to detect landing targets and produce approach waypoints for autonomous landing. The vehicle control algorithm uses a Kalman filter based approach for pose estimation to fuse visual SLAM (PTAM) position estimates with IMU data to correct for high latency SLAM inputs and to increase the position estimate update rate in order to improve control stability. Scale recovery is achieved using inputs from a sonar altimeter. In experimental runs, we demonstrate a real-time implementation running on-board a micro aerial vehicle that is fully self-contained and independent from any external sensor information. With this method, the vehicle is able to search autonomously for a landing location and perform precision landing maneuvers on the detected targets.

Silicon micro sensors as integrated readout platform for colorimetric and fluorescence based opto-chemical transducers

NASA Astrophysics Data System (ADS)

Will, Matthias; Martan, Tomas; Brodersen, Olaf

2011-09-01

Opto-chemical transducer almost offers unlimited possibilities for detection of physical quantities. New technologies and research show a steady increasing of publications in the area of sensoric principles. For transfer to real world applications the optical response has to be converted into an electrical signal. An exceptional opto chemical transducer loses the attraction if complex and expensive instruments for analysis are requires. Therefore, the readout system must be very compact and producible for low cost. In this presentation, the technology platform as a solution for these problems will be presented. We combine micro structuring of silicon, photodiode fabrication, chip in chip mounting and novel assembly technologies for creation of a flexible sensor platform. This flexible combination of technologies allows fabricating a family of planar optical remission sensors. With variation of design and modifications, we are able to detect colorimetric, fluorescent properties of an sensitive layer attached on the sensor surface. In our sensor with typical size of 6mm x 6mm x 1mm different emitting sources based on LED's or laser diodes, multiple detection cannels for the remitted light and also measurement of temperature are included. Based on these sensors we proof the concept by demonstrating sensors for oxygen, carbon dioxide and ammonia based on colorimetric and fluorescent changes in the transducer layer. In both configurations, LED's irradiated the sensitive polymer layer through a transparent substrate. The absorption or fluorescence properties of dyed polymer are changed by the chemical reaction and light response is detected by PIN diodes. The signal shift is analyzed by using a computer controlled evaluation board of own construction. Accuracy and reliability of the remission sensor system were verified and the whole sensor system was experimentally tested in the range of concentrations from 50 ppm up to 100 000 ppm for CO2 and O2 Furthermore, we develop concepts to use the sensor also for interferometric detection of layer properties and the combination with capacitive structures on the surface. This allows detecting of thickness or refractive index variation of layers in future.

Asymmetric disappearance and periodic asymmetric phenomena of rocking dynamics in micro dual-capacitive energy harvester

NASA Astrophysics Data System (ADS)

Zhu, Jianxiong; Guo, Xiaoyu; Huang, Run

2018-06-01

We study asymmetric disappearance and period asymmetric phenomena starting with a rocking dynamic in micro dual-capacitive energy harvester. The mathematical model includes nonlinear electrostatic forces from the variable dual capacitor, the numerical functioned forces provided by suspending springs, linear damping forces and an external vibration force. The suspending plate and its elastic supports were designed in a symmetric structure in the micro capacitor, however, the reported energy harvester was unavoidable starting with a asymmetric motion in the real vibration environment. We found that the designed dual energy capacitive harvester can harvest ˜6 µW with 10V input voltage, and under 0.8 time's resonant frequency vibration. We also discovered that the rocking dynamics of the suspended plate can be showed with an asymmetric disappearance or periodic asymmetric phenomena starting with an asymmetric motion. The study of these asymmetric disappearance and period asymmetric phenomena were not only important for the design of the stability of the micro capacitor for sensor or the energy harvesting, but also gave a deep understanding of the rocking nonlinear dynamics of the complex micro structures and beams.

Ferroelectric thin-film active sensors for structural health monitoring

NASA Astrophysics Data System (ADS)

Lin, Bin; Giurgiutiu, Victor; Yuan, Zheng; Liu, Jian; Chen, Chonglin; Jiang, Jiechao; Bhalla, Amar S.; Guo, Ruyan

2007-04-01

Piezoelectric wafer active sensors (PWAS) have been proven a valuable tool in structural health monitoring. Piezoelectric wafer active sensors are able to send and receive guided Lamb/Rayleigh waves that scan the structure and detect the presence of incipient cracks and structural damage. In-situ thin-film active sensor deposition can eliminate the bonding layer to improve the durability issue and reduce the acoustic impedance mismatch. Ferroelectric thin films have been shown to have piezoelectric properties that are close to those of single-crystal ferroelectrics but the fabrication of ferroelectric thin films on structural materials (steel, aluminum, titanium, etc.) has not been yet attempted. In this work, in-situ fabrication method of piezoelectric thin-film active sensors arrays was developed using the nano technology approach. Specification for the piezoelectric thin-film active sensors arrays was based on electro-mechanical-acoustical model. Ferroelectric BaTiO3 (BTO) thin films were successfully deposited on Ni tapes by pulsed laser deposition under the optimal synthesis conditions. Microstructural studies by X-ray diffractometer and transmission electron microscopy reveal that the as-grown BTO thin films have the nanopillar structures with an average size of approximately 80 nm in diameter and the good interface structures with no inter-diffusion or reaction. The dielectric and ferroelectric property measurements exhibit that the BTO films have a relatively large dielectric constant, a small dielectric loss, and an extremely large piezoelectric response with a symmetric hysteresis loop. The research objective is to develop the fabrication and optimum design of thin-film active sensor arrays for structural health monitoring applications. The short wavelengths of the micro phased arrays will permit the phased-array imaging of smaller parts and smaller damage than is currently not possible with existing technology.

MEMS- and NEMS-based smart devices and systems

NASA Astrophysics Data System (ADS)

Varadan, Vijay K.

2001-11-01

The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sized now don at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: 1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic an micro molding techniques; 2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; 3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; 4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sensing and control of a variety functions in automobile, aerospace, marine and civil structures and food and medical industries. This unique combination of technologies also results in novel conformal sensors that can be remotely sensed by an antenna system with the advantage of no power requirements at the sensor site. This paper provides a brief review of MEMS and NEMS based smart systems for various applications mentioned above. Carbon Nano Tubes (CNT) with their unique structure, have already proven to be valuable in their application as tips for scanning probe microscopy, field emission devices, nanoelectronics, H2-storage, electromagnetic absorbers, ESD, EMI films and coatings and structural composites. For many of these applications, highly purified and functionalized CNT which are compatible with many host polymers are needed. A novel microwave CVD processing technique to meet these requirements has been developed at Penn State Center for the engineering of Electronic and Acoustic Materials and Devices (CEEAMD). This method enables the production of highly purified carbon nano tubes with variable size (from 5-40 nm) at low cost (per gram) and high yield. Whereas, carbon nano tubes synthesized using the laser ablation or arc discharge evaporation method always include impurity due to catalyst or catalyst support. The Penn State research is based on the use of zeolites over other metal/metal oxides in the microwave field for a high production and uniformity of the product. An extended conventional purification method has been employed to purify our products in order to remove left over impurity. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross- linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composites will be presented.

A novel fiber optic Fabry-Perot structure with a micrometric diameter tip

NASA Astrophysics Data System (ADS)

Wang, Xingwei; Xu, Juncheng; Wang, Zhuang; Cooper, Kristie L.; Wang, Anbo

2006-08-01

This paper presents a novel fiber optic Fabry-Perot (FP) structure with a micrometric diameter tip. The fabrication of micro scale probes has become essential in intracellular surgery, in cell sensing, manipulation, and injection. It is of great importance in many fields, such as genetics, pathology, criminology, pharmacogenetics, and food safety. With such a tiny protrusion, the sensor can be inserted into micron size cells, say, for DNA analysis. With the FP cavity inside the fiber, the change of optical path difference (OPD) caused by the environment can be demodulated. In addition, the structure is intrinsically capable of temperature compensation. What's more, it is simple, cost-efficient, and compact. Last but not the least, the structure shows promise for nanometric protrusion. Once this goal is achieved, the sensor can be inserted into most cells. The sensor could pave the way for faster, more accurate medical diagnostic tests for countless conditions and may ultimately save lives by allowing earlier disease detection and intervention.

Micro-patterning and characterization of PHEMA-co-PAM-based optical chemical sensors for lab-on-a-chip applications

PubMed Central

Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R.; Meldrum, Deirdre R.

2012-01-01

We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O2) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes. PMID:23175599

A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film

PubMed Central

Wang, Hairong; Chen, Lei; Wang, Jiaxin; Sun, Quantao; Zhao, Yulong

2014-01-01

An oxygen gas microsensor based on nanostructured sol-gel TiO2 thin films with a buried Pd layer was developed on a silicon substrate. The nanostructured titania thin films for O2 sensors were prepared by the sol-gel process and became anatase after heat treatment. A sandwich TiO2 square board with an area of 350 μm × 350 μm was defined by both wet etching and dry etching processes and the wet one was applied in the final process due to its advantages of easy control for the final structure. A pair of 150 nm Pt micro interdigitated electrodes with 50 nm Ti buffer layer was fabricated on the board by a lift-off process. The sensor chip was tested in a furnace with changing the O2 concentration from 1.0% to 20% by monitoring its electrical resistance. Results showed that after several testing cycles the sensor's output becomes stable, and its sensitivity is 0.054 with deviation 2.65 × 10−4 and hysteresis is 8.5%. Due to its simple fabrication process, the sensor has potential for application in environmental monitoring, where lower power consumption and small size are required. PMID:25192312

A flexible transcutaneous oxygen sensor using polymer membranes.

PubMed

Kudo, Hiroyuki; Iguchi, Shigehito; Yamada, Takua; Kawase, Tatsuya; Saito, Hirokazu; Otsuka, Kimio; Mitsubayashi, Kohji

2007-02-01

A wearable and flexible oxygen sensor for transcutaneous blood gas monitoring was fabricated and tested. The sensor has a laminar film-like structure, which was fabricated by pouching KCl electrolyte solution by both non-permeable (metal weldable) sheet and gas-permeable membrane with Pt- and Ag/AgCl-electrodes patterned using microfabrication process. The electrolyte solution was fixed only by heat-sealing the edges of the weldable membranes without any chemical adhesives. The wearable oxygen sensor (thickness: 84 mum) was applied to the electrochemical measurement with a constant potential of -600 mV vs. Ag/AgCl, thus obtaining the calibration range to dissolved oxygen (DO) from 0.0 to 7.0 mg/l with a correlation coefficient of 0.998 and the quick response time (53.4 s to 90% of a steady-state current), which operate similarly to a commercially available oxygen electrode. The sensor was also utilized to transcutaneous oxygen monitoring for healthy human subject. The sensing region of the wearable oxygen sensor was attached onto the forearm-skin surface of the subject inhaling various concentrations of oxygen. As a result of physiological application, the output current was varied from -6.2 microA to -7.8 microA within 2 min when the concentration of inhaling oxygen was changed from atmospheric air to 60% oxygen. Thus, the transcutaneous oxygen was successfully monitored without any inconveniences such as skin inflammation, etc.

A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement

PubMed Central

Zhang, Guodong; Zhao, Yulong; Zhao, Yun; Wang, Xinchen; Ren, Wei; Li, Hui; Zhao, You

2018-01-01

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor’s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm × 0.1 mm × 2 μm and copper electrodes of 2 μm thick are sputtered sequentially on the substrate, and a 25 μm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa−1. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size. PMID:29494519

Design, fabrication and characterization of a micro-fluxgate intended for parallel robot application

NASA Astrophysics Data System (ADS)

Kirchhoff, M. R.; Bogdanski, G.; Büttgenbach, S.

2009-05-01

This paper presents a micro-magnetometer based on the fluxgate principle. Fluxgates detect the magnitude and direction of DC and low-frequency AC magnetic fields. The detectable flux density typically ranges from several 10 nT to about 1 mT. The introduced fluxgate sensor is fabricated using MEMS-technologies, basically UV depth lithography and electroplating for manufacturing high aspect ratio structures. It consists of helical copper coils around a soft magnetic nickel-iron (NiFe) core. The core is designed in so-called racetrack geometry, whereby the directional sensitivity of the sensor is considerably higher compared to common ring-core fluxgates. The electrical operation is based on analyzing the 2nd harmonic of the AC output signal. Configuration, manufacturing and selected characteristics of the fluxgate magnetometer are discussed in this work. The fluxgate builds the basis of an innovative angular sensor system for a parallel robot with HEXA-structure. Integrated into the passive joints of the parallel robot, the fluxgates are combined with permanent magnets rotating on the joint shafts. The magnet transmits the angular information via its magnetic orientation. In this way, the angles between the kinematic elements are measured, which allows self-calibration of the robot and the fast analytical solution of direct kinematics for an advanced workspace monitoring.

All solution-processed micro-structured flexible electrodes for low-cost light-emitting pressure sensors fabrication.

PubMed

Shimotsu, Rie; Takumi, Takahiro; Vohra, Varun

2017-07-31

Recent studies have demonstrated the advantage of developing pressure-sensitive devices with light-emitting properties for direct visualization of pressure distribution, potential application to next generation touch panels and human-machine interfaces. To ensure that this technology is available to everyone, its production cost should be kept as low as possible. Here, simple device concepts, namely, pressure sensitive flexible hybrid electrodes and OLED architecture, are used to produce low-cost resistive or light-emitting pressure sensors. Additionally, integrating solution-processed self-assembled micro-structures into the flexible hybrid electrodes composed of an elastomer and conductive materials results in enhanced device performances either in terms of pressure or spatial distribution sensitivity. For instance, based on the pressure applied, the measured values for the resistances of pressure sensors range from a few MΩ down to 500 Ω. On the other hand, unlike their evaporated equivalents, the combination of solution-processed flexible electrodes with an inverted OLED architectures display bright green emission when a pressure over 200 kPa is applied. At a bias of 3 V, their luminance can be tuned by applying a higher pressure of 500 kPa. Consequently, features such as fingernails and fingertips can be clearly distinguished from one another in these long-lasting low-cost devices.

Cascaded-cavity Fabry-Perot interferometer for simultaneous measurement of temperature and strain with cross-sensitivity compensation

NASA Astrophysics Data System (ADS)

Tian, Jiajun; Jiao, Yuzhu; Ji, Shaobo; Dong, Xiaolong; Yao, Yong

2018-04-01

We propose and demonstrate a fiber sensor for simultaneous temperature and strain measurements. The proposed sensor is implemented by a cascaded-cavity Fabry-Perot (FP) fiber interferometer. The two cascaded FP cavities comprise a micro-air-cavity in a hollow-core tube fiber and a micro-silica-cavity in a standard single-mode fiber. To separate the interference spectrum of each FP cavity, the total spectrum is filtered in the frequency domain through band-pass filters, whose central frequencies were predesigned based on the relationship between the spatial frequency and free spectral range of each FP cavity. The different cross-sectional areas and thermal-optic coefficients of the two FP cavities confer different sensitivities to temperature and strain. Both parameters were measured simultaneously by tracking the wavelength shifts in the filtered interference spectra of the FP cavities. Moreover, the temperature-strain cross-sensitivity was compensated by solving a sensitivity-coefficient matrix equation for the two cavities, using the calibrated temperatures and strains. Other advantages of the proposed sensor are simple fabrication and an all-fiber structure. Owing to these properties, the proposed sensor is potentially applicable to real sensing applications.

Fly Ear Inspired Miniature Acoustic Sensors for Detection and Localization

DTIC Science & Technology

2011-07-31

Micro-Opto-Electro-Mechnical-System ( MOEMS ) sensor platform that is capable of integrating multiplexed Fabry-Perot (FP) interferometer based sensors. A...on a single MOEMS chip is shown in Figure 8. Light from a low coherence light source with a coherence length Lc is first sent to the reference...towards developing a low coherence interferometer based MOEMS detection system. An optical Micro-Electro-Mechanical-System (MEMS) sensor platform was

Fiber-optic sensor applications in civil and geotechnical engineering

NASA Astrophysics Data System (ADS)

Habel, Wolfgang R.; Krebber, Katerina

2011-09-01

Different types of fiber-optic sensors based on glass or polymeric fibers are used to evaluate material behavior or to monitor the integrity and long-term stability of load-bearing structure components. Fiber-optic sensors have been established as a new and innovative measurement technology in very different fields, such as material science, civil engineering, light-weight structures, geotechnical areas as well as chemical and high-voltage substations. Very often, mechanical quantities such as deformation, strain or vibration are requested. However, measurement of chemical quantities in materials and structure components, such as pH value in steel reinforced concrete members also provides information about the integrity of concrete structures. A special fiber-optic chemical sensor for monitoring the alkaline state (pH value) of the cementitious matrix in steel-reinforced concrete structures with the purpose of early detection of corrosion-initiating factors is described. The paper presents the use of several fiber-optic sensor technologies in engineering. One example concerns the use of highly resolving concrete-embeddable fiber Fabry-Perot acoustic emission (AE) sensors for the assessment of the bearing behaviour of large concrete piles in existing foundations or during and after its installation. Another example concerns fiber Bragg grating (FBG) sensors attached to anchor steels (micro piles) to measure the strain distribution in loaded soil anchors. Polymer optical fibers (POF) can be — because of their high elasticity and high ultimate strain — well integrated into textiles to monitor their deformation behaviour. Such "intelligent" textiles are capable of monitoring displacement of soil or slopes, critical mechanical deformation in geotechnical structures (dikes, dams, and embankments) as well as in masonry structures during and after earthquakes.

Investigation on micromachining technologies for the realization of LTCC devices and systems

NASA Astrophysics Data System (ADS)

Haas, T.; Zeilmann, C.; Bittner, A.; Schmid, U.

2011-06-01

Low temperature co-fired ceramics (LTCC) has established as a widespread platform for advanced functional ceramic devices in different applications, such as in the space and aviation sector, for micro machined sensors as well as in micro fluidics. This is due to high reliability, excellent physical properties, especially in the high frequency range, and the possibility to integrate passive components in the monolithic LTCC body, offering the potential for a high degree of miniaturisation. However, for further improvement of this technology and for an ongoing increase of the integration level, the realization of miniaturized structures is of utmost importance. Therefore, novel techniques for micro-machining are required providing channel structures and cavities inside the glass-ceramic body, enabling for further application scenarios. Those techniques are punching, laser cutting and embossing. One of the most limitations of LTCC is the poor thermal conductivity. Hence, the possibility to integrate channels enables innovative active cooling approaches using fluidic media for heat critical devices. Doing so, a by far better cooling effect can be achieved than by passive devices as heat spreaders or heat sinks. Furthermore, the realization of mechanic devices as integrated pressure sensors for operation under harsh environmental conditions can be realized by integrating the membrane directly into the ceramic body. Finally, for high power devices substantial improvement can be provided by filling those channel structures with electrical conductive material, so that the resistivity can be decreased drastically without affecting the topography of the ceramics.

Development and analysis of new type microresonator with electro-optic feedback

NASA Astrophysics Data System (ADS)

Janusas, Giedrius; Palevicius, Arvydas; Cekas, Elingas; Brunius, Alfredas; Bauce, Jokubas

2016-04-01

Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.

Strain evaluation of strengthened concrete structures using FBG sensors

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lau Kintak; Zhou Limin; Ye Lin

1999-12-02

Fibre-optic Bragg Grating (FBG) sensor presents a great deal of potential in monitoring the internal status of the concrete structures after repairing or strengthening by an external adhered reinforcement. It can be used in a variety of configurations ranging from pointwise to multi-point strain measurement in order to investigate the strain distribution of the structures. In this paper, an experimental investigation on the rectangular notched-concrete beam, which was strengthened by glass fibre composites with the embedment of multiplexing FBG sensors is presented. Three point bending test was performed to investigate the strain profile of the specimen. Frequency modulated continuous wavemore » (FMCW) technique was used to measure the strain variation of the fibre-grating regions. The results give a good agreement with the electrical resistance strain gauge in early loading condition. The difference of the strain-measuring results between the strain-gauge and FBG sensor was increased when further increasing the applied load. It was suspected that the micro/marco cracks occurred on the concrete surface and that the externally bonded strain-measuring device cannot be detected.« less

Capacitance variation measurement method with a continuously variable measuring range for a micro-capacitance sensor

NASA Astrophysics Data System (ADS)

Lü, Xiaozhou; Xie, Kai; Xue, Dongfeng; Zhang, Feng; Qi, Liang; Tao, Yebo; Li, Teng; Bao, Weimin; Wang, Songlin; Li, Xiaoping; Chen, Renjie

2017-10-01

Micro-capacitance sensors are widely applied in industrial applications for the measurement of mechanical variations. The measurement accuracy of micro-capacitance sensors is highly dependent on the capacitance measurement circuit. To overcome the inability of commonly used methods to directly measure capacitance variation and deal with the conflict between the measurement range and accuracy, this paper presents a capacitance variation measurement method which is able to measure the output capacitance variation (relative value) of the micro-capacitance sensor with a continuously variable measuring range. We present the principles and analyze the non-ideal factors affecting this method. To implement the method, we developed a capacitance variation measurement circuit and carried out experiments to test the circuit. The result shows that the circuit is able to measure a capacitance variation range of 0-700 pF linearly with a maximum relative accuracy of 0.05% and a capacitance range of 0-2 nF (with a baseline capacitance of 1 nF) with a constant resolution of 0.03%. The circuit is proposed as a new method to measure capacitance and is expected to have applications in micro-capacitance sensors for measuring capacitance variation with a continuously variable measuring range.

Micro-controller based air pressure monitoring instrumentation system using optical fibers as sensor

NASA Astrophysics Data System (ADS)

Hazarika, D.; Pegu, D. S.

2013-03-01

This paper describes a micro-controller based instrumentation system to monitor air pressure using optical fiber sensors. The principle of macrobending is used to develop the sensor system. The instrumentation system consists of a laser source, a beam splitter, two multi mode optical fibers, two Light Dependent Resistance (LDR) based timer circuits and a AT89S8252 micro-controller. The beam splitter is used to divide the laser beam into two parts and then these two beams are launched into two multi mode fibers. One of the multi mode fibers is used as the sensor fiber and the other one is used as the reference fiber. The use of the reference fiber is to eliminate the environmental effects while measuring the air pressure magnitude. The laser beams from the sensor and reference fibers are applied to two identical LDR based timer circuits. The LDR based timer circuits are interfaced to a micro-controller through its counter pins. The micro-controller samples the frequencies of the timer circuits using its counter-0 and counter-1 and the counter values are then processed to provide the measure of air pressure magnitude.

Nanotechnology: MEMS and NEMS and their applications to smart systems and devices

NASA Astrophysics Data System (ADS)

Varadan, Vijay K.

2003-10-01

The microelectronics industry has seen explosive growth during the last thirty years. Extremely large markets for logic and memory devices have driven the development of new materials, and technologies for the fabrication of even more complex devices with features sizes now down at the sub micron and nanometer level. Recent interest has arisen in employing these materials, tools and technologies for the fabrication of miniature sensors and actuators and their integration with electronic circuits to produce smart devices and systems. This effort offers the promise of: (1) increasing the performance and manufacturability of both sensors and actuators by exploiting new batch fabrication processes developed including micro stereo lithographic and micro molding techniques; (2) developing novel classes of materials and mechanical structures not possible previously, such as diamond like carbon, silicon carbide and carbon nanotubes, micro-turbines and micro-engines; (3) development of technologies for the system level and wafer level integration of micro components at the nanometer precision, such as self-assembly techniques and robotic manipulation; (4) development of control and communication systems for MEMS devices, such as optical and RF wireless, and power delivery systems, etc. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composite provide a new avenue for future smart systems. The integration of NEMS (NanoElectroMechanical Systems), MEMS, IDTs (Interdigital Transducers) and required microelectronics and conformal antenna in the multifunctional smart materials and composites results in a smart system suitable for sending and control of a variety functions in automobile, aerospace, marine and civil strutures and food and medical industries. This unique combination of technologies also results in novel conformal sensors that can be remotely sensed by an antenna system with the advantage of no power requirements at the sensor site. This paper provides a brief review of MEMS and NEMS based smart systems for various applications mentioned above. Carbon Nano Tubes (CNT) with their unique structure, have already proven to be valuable in their application as tips for scanning probe microscopy, field emission devices, nanoelectronics, H2-storage, electromagnetic absorbers, ESD, EMI films and coatings and structural composites. For many of these applications, highly purified and functionalized CNT which are compatible with many host polymers are needed. A novel microwave CVD processing technique to meet these requirements has been developed at Penn State Center for the Engineering of Electronic and Acoustic Materials and Devices (CEEAMD). This method enables the production of highly purified carbon nano tubes with variable size (from 5 - 40 nm) at low cost (per gram) and high yield. Whereas, carbon nano tubes synthesized using the laser ablation or arc discharge evaporation method always include impurity due to catalyst or catalyst support. The Penn State research is based on the use of zeolites over other metal/metal oxides in the microwave field for a high production and uniformity of the product. An extended coventional purification method has been employed to purify our products in order to remove left over impurity. A novel composite structure can be tailored by functionalizing carbon nano tubes and chemically bonding them with the polymer matrix e.g. block or graft copolymer, or even cross-linked copolymer, to impart exceptional structural, electronic and surface properties. Bio- and Mechanical-MEMS devices derived from this hybrid composites will be presented.

In Situ Monitoring of Temperature inside Lithium-Ion Batteries by Flexible Micro Temperature Sensors

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Tang, Ming-Shao; Chen, Pei-Chi

2011-01-01

Lithium-ion secondary batteries are commonly used in electric vehicles, smart phones, personal digital assistants (PDA), notebooks and electric cars. These lithium-ion secondary batteries must charge and discharge rapidly, causing the interior temperature to rise quickly, raising a safety issue. Over-charging results in an unstable voltage and current, causing potential safety problems, such as thermal runaways and explosions. Thus, a micro flexible temperature sensor for the in in-situ monitoring of temperature inside a lithium-ion secondary battery must be developed. In this work, flexible micro temperature sensors were integrated into a lithium-ion secondary battery using the micro-electro-mechanical systems (MEMS) process for monitoring temperature in situ. PMID:22163735

In situ monitoring of temperature inside lithium-ion batteries by flexible micro temperature sensors.

PubMed

Lee, Chi-Yuan; Lee, Shuo-Jen; Tang, Ming-Shao; Chen, Pei-Chi

2011-01-01

Lithium-ion secondary batteries are commonly used in electric vehicles, smart phones, personal digital assistants (PDA), notebooks and electric cars. These lithium-ion secondary batteries must charge and discharge rapidly, causing the interior temperature to rise quickly, raising a safety issue. Over-charging results in an unstable voltage and current, causing potential safety problems, such as thermal runaways and explosions. Thus, a micro flexible temperature sensor for the in in-situ monitoring of temperature inside a lithium-ion secondary battery must be developed. In this work, flexible micro temperature sensors were integrated into a lithium-ion secondary battery using the micro-electro-mechanical systems (MEMS) process for monitoring temperature in situ.

A Carbon Nanotube Reporter of miRNA Hybridization Events In Vivo

PubMed Central

Harvey, Jackson D.; Jena, Prakrit V.; Baker, Hanan A.; Zerze, Gül H.; Williams, Ryan M.; Galassi, Thomas V.; Roxbury, Daniel; Mittal, Jeetain

2017-01-01

MicroRNAs and other small oligonucleotides in biofluids are promising disease biomarkers, yet conventional assays require complex processing steps that are unsuitable for point-of-care testing or for implantable or wearable sensors. Single-walled carbon nanotubes are an ideal material for implantable sensors, owing to their emission in the near-infrared spectral region, photostability and exquisite sensitivity. Here, we report an engineered carbon-nanotube-based sensor capable of real-time optical quantification of hybridization events of microRNA and other oligonucleotides. The mechanism of the sensor arises from competitive effects between displacement of both oligonucleotide charge groups and water from the nanotube surface, which result in a solvatochromism-like response. The sensor, which allows for detection via single-molecule sensor elements and for multiplexing by using multiple nanotube chiralities, can monitor toehold-based strand-displacement events, which reverse the sensor response and regenerate the sensor complex. We also show that the sensor functions in whole urine and serum, and can non-invasively measure DNA and microRNA after implantation in live mice. PMID:28845337

A Carbon Nanotube Reporter of miRNA Hybridization Events In Vivo.

PubMed

Harvey, Jackson D; Jena, Prakrit V; Baker, Hanan A; Zerze, Gül H; Williams, Ryan M; Galassi, Thomas V; Roxbury, Daniel; Mittal, Jeetain; Heller, Daniel A

2017-01-01

MicroRNAs and other small oligonucleotides in biofluids are promising disease biomarkers, yet conventional assays require complex processing steps that are unsuitable for point-of-care testing or for implantable or wearable sensors. Single-walled carbon nanotubes are an ideal material for implantable sensors, owing to their emission in the near-infrared spectral region, photostability and exquisite sensitivity. Here, we report an engineered carbon-nanotube-based sensor capable of real-time optical quantification of hybridization events of microRNA and other oligonucleotides. The mechanism of the sensor arises from competitive effects between displacement of both oligonucleotide charge groups and water from the nanotube surface, which result in a solvatochromism-like response. The sensor, which allows for detection via single-molecule sensor elements and for multiplexing by using multiple nanotube chiralities, can monitor toehold-based strand-displacement events, which reverse the sensor response and regenerate the sensor complex. We also show that the sensor functions in whole urine and serum, and can non-invasively measure DNA and microRNA after implantation in live mice.

Advanced Sensor and Packaging Technologies for Intelligent Adaptive Engine Controls (Preprint)

DTIC Science & Technology

2013-05-01

combination of micro-electromechanical systems (MEMS) sensor technology, novel ceramic materials, high - temperature electronics, and advanced harsh...with simultaneous pressure measurements up to 1,000 psi. The combination of a high - temperature , high -pressure-ratio compressor system, and adaptive...combination of micro-electromechanical systems (MEMS) sensor technology, novel ceramic materials, high temperature electronics, and advanced harsh

Dielectric micro-resonator-based opto-mechanical systems for sensing applications

NASA Astrophysics Data System (ADS)

Ali, Amir Roushdy

In recent years, whispering gallery mode (WGM), or morphology dependent optical resonances (MDR) of dielectric micro-resonators have attracted interest with proposed applications in a wide range of areas due to the high optical quality factors, Q, they can exhibit (reaching ~ 10. 9 for silica spheres). Micro-resonator WGMs have been used in applications that include those in spectroscopy, micro-cavity laser technology, optical communications (switching, filtering and multiplexing), sensors technologies and even chemical and biological sensing. The WGM of these dielectric micro-resonators are highly sensitive to morphological changes (such as the size, shape, or refractive index) of the resonance cavity and hence, can be tuned by causing a minute change in the physical condition of the surrounding. In this dissertation, we have been creating opto-mechanical systems, which at their most basic, are extraordinarily sensitive sensors. One of the ultimate goals of this dissertation is to develop sensors capable of detecting the extremely small electric field changes. To improve the performance of the sensors, we couple a polymer cantilever beam to a dielectric micro-resonator. The eventual use of such ultra sensitive electric filed sensors could include neural-machine interfaces for advanced prosthetics devices. The work presented here includes a basic analysis and experimental investigations of the electric field sensitivity and range of micro-resonators of several different materials and geometries followed by the electric field sensor design, testing, and characterization. Also, the effects of angular velocity on the WGM shifts of spherical micro-resonators are also investigated. The elastic deformation that is induced on a spinning resonator due to the centrifugal force may lead to a sufficient shift in the optical resonances and therefore interfering with its desirable operational sensor design. Furthermore, this principle could be used for the development of angular speed detection photonic sensors. In previous applications, the WGM shifts induced by the external effects were monitored by identifying and tracking individual resonance dip in the optical transmission spectrum. The success of the WGM sensors is strongly dependent on the precise and speeds tracking of the shifts of the resonant wavelengths. In this dissertation, we demonstrate the application of WGM micro-resonators for high-speed transient sensing (wide-bandwidth). To facilitate the use of the sensors for high-speed transient applications, we tune the interrogation laser using a harmonic rather than a ramp waveform and calibrate the laser response at various input frequencies and amplitudes using a Fabry-Perot interferometer. WGM shifts are tracked using a fast cross-correlation algorithm on the transmission spectra. We demonstrate dynamic force measurements up to 10 kHz using this approach. We also present a simple lumped-heat capacity thermal model to predict the laser's tuning response.

Micro-sensors for in-situ meteorological measurements

NASA Technical Reports Server (NTRS)

Crisp, David; Kaiser, William J.; Vanzandt, Thomas R.; Tillman, James E.

1993-01-01

Improved in-situ meteorological measurements are needed for monitoring the weather and climate of the terrestrial and Martian atmospheres. We have initiated a program to assess the feasibility and utility of micro-sensors for precise in-situ meteorological measurements in these environments. Sensors are being developed for measuring pressure, temperature, wind velocity, humidity, and aerosol amounts. Silicon micro-machining and large scale integration technologies are being used to make sensors that are small, rugged, lightweight, and require very little power. Our long-term goal is to develop very accurate miniaturized sensors that can be incorporated into complete instrument packages or 'micro weather stations,' and deployed on a variety of platforms. If conventional commercially available silicon production techniques can be used to fabricate these sensor packages, it will eventually be possible to mass-produce them at low cost. For studies of the Earth's troposphere and stratosphere, they could be deployed on aircraft, dropsondes, radiosondes, or autonomous surface stations at remote sites. Improved sensor accuracy and reduced sensor cost are the primary challenges for these applications. For studies of the Martian atmosphere, these sensor packages could be incorporated into the small entry probes and surface landers that are being planned for the Mars Environmental SURvey (MESUR) Mission. That decade-long program will deploy a global network of small stations on the Martian surface for monitoring meteorological and geological processes. Low mass, low power, durability, large dynamic range and calibration stability are the principal challenges for this application. Our progress on each of these sensor types is presented.

Development of GaN-based micro chemical sensor nodes

NASA Technical Reports Server (NTRS)

Son, Kyung-ah; Prokopuk, Nicholas; George, Thomas; Moon, Jeong S.

2005-01-01

Sensors based on III-N technology are gaining significant interest due to their potential for monolithic integration of RF transceivers and light sources and the capability of high temperature operations. We are developing a GaN-based micro chemical sensor node for remote detection of chemical toxins, and present electrical responses of AlGaN/GaN HEMT (High Electron Mobility Transistor) sensors to chemical toxins as well as other common gases.

Parametric investigation of scalable tactile sensors

NASA Astrophysics Data System (ADS)

Saadatzi, Mohammad Nasser; Yang, Zhong; Baptist, Joshua R.; Sahasrabuddhe, Ritvij R.; Wijayasinghe, Indika B.; Popa, Dan O.

2017-05-01

In the near future, robots and humans will share the same environment and perform tasks cooperatively. For intuitive, safe, and reliable physical human-robot interaction (pHRI), sensorized robot skins for tactile measurements of contact are necessary. In a previous study, we presented skins consisting of strain gauge arrays encased in silicone encapsulants. Although these structures could measure normal forces applied directly onto the sensing elements, they also exhibited blind spots and response asymmetry to certain loading patterns. This study presents a parametric investigation of piezoresistive polymeric strain gauge that exhibits a symmetric omniaxial response thanks to its novel star-shaped structure. This strain gauge relies on the use of gold micro-patterned star-shaped structures with a thin layer of PEDOT:PSS which is a flexible polymer with piezoresistive properties. In this paper, the sensor is first modeled and comprehensively analyzed in the finite-element simulation environment COMSOL. Simulations include stress-strain loading for a variety of structure parameters such as gauge lengths, widths, and spacing, as well as multiple load locations relative to the gauge. Subsequently, sensors with optimized configurations obtained through simulations were fabricated using cleanroom photolithographic and spin-coating processes, and then experimentally tested. Results show a trend-wise agreement between experiments and simulations.

Innovative smart micro sensors for Army weaponry applications

NASA Astrophysics Data System (ADS)

Ruffin, Paul B.; Brantley, Christina; Edwards, Eugene

2008-03-01

Micro sensors offer the potential solution to cost, size, and weight issues associated with smart networked sensor systems designed for environmental/missile health monitoring and rocket out-gassing/fuel leak detection, as well as situational awareness on the battlefield. In collaboration with the University of Arkansas (Fayetteville), University of Alabama (Tuscaloosa and Birmingham), Alabama A&M University (Normal), and Streamline Automation (Huntsville, AL), scientists and engineers at the Army Aviation & Missile Research, Development, and Engineering Center (AMRDEC) are investigating several nano-based technologies to solve the problem of sensing extremely small levels of toxic gases associated with both chemical warfare agents (in air and liquids) and potential rocket motor leaks. Innovative techniques are being devised to adapt voltammetry, which is a well established technique for the detection and quantification of substances dissolved in liquids, to low-cost micro sensors for detecting airborne chemical agents and potential missile propellant leakages. In addition, a surface enhanced Raman scattering (SERS) technique, which enhances Raman scattered light by excitation of surface plasmons on nanoporous metal surfaces (nanospheres), is being investigated to develop novel smart sensors for the detection of chemical agents (including rocket motor out-gassing) and potential detection of home-made explosive devices. In this paper, results are delineated that are associated with experimental studies, which are conducted for the aforementioned cases and for several other nano-based technology approaches. The design challenges of each micro sensor technology approach are discussed. Finally, a comparative analysis of the various innovative micro-sensor techniques is provided.

A simple and effective approach towards biomimetic replication of photonic structures from butterfly wings.

PubMed

Zhu, Shenmin; Zhang, Di; Chen, Zhixin; Gu, Jiajun; Li, Wenfei; Jiang, Haibo; Zhou, Gang

2009-08-05

A general sonochemical process is reported for the replication of photonic structures from Morpho butterfly wings in several hours. By selecting appropriate precursors, we can achieve exact replications of photonic structures in a variety of transparent metal oxides, such as titania, tin oxide and silica. The exact replications at the micro- and nanoscales were characterized by a combination of FE-SEM, TEM, EDX and Raman measurements. The optical properties of the replicas were investigated by using reflectance spectroscopy, and it was found that the interesting chromaticity of the reflected light could be adjusted simply by tuning the replica materials. An ultrasensitive SnO(2)-based chemical sensor was prepared from the SnO(2) replica. The sensor has a sensitivity of 35.3-50 ppm ethanol at 300 degrees C, accompanied by a rapid response and recovery (around 8-15 s), owing to its large surface area and photonic structure. Thus, this process could be developed to produce photonic structural ceramics which could be used in many passive and active infrared devices, especially high performance optical components and sensors.

One-Dimensional Oxide Nanostructures as Gas-Sensing Materials: Review and Issues

PubMed Central

Choi, Kyoung Jin; Jang, Ho Won

2010-01-01

In this article, we review gas sensor application of one-dimensional (1D) metal-oxide nanostructures with major emphases on the types of device structure and issues for realizing practical sensors. One of the most important steps in fabricating 1D-nanostructure devices is manipulation and making electrical contacts of the nanostructures. Gas sensors based on individual 1D nanostructure, which were usually fabricated using electron-beam lithography, have been a platform technology for fundamental research. Recently, gas sensors with practical applicability were proposed, which were fabricated with an array of 1D nanostructures using scalable micro-fabrication tools. In the second part of the paper, some critical issues are pointed out including long-term stability, gas selectivity, and room-temperature operation of 1D-nanostructure-based metal-oxide gas sensors. PMID:22319343

Development of optical MEMS CO2 sensors

NASA Astrophysics Data System (ADS)

McNeal, Mark P.; Moelders, Nicholas; Pralle, Martin U.; Puscasu, Irina; Last, Lisa; Ho, William; Greenwald, Anton C.; Daly, James T.; Johnson, Edward A.; George, Thomas

2002-09-01

Inexpensive optical MEMS gas and chemical sensors offer chip-level solutions to environmental monitoring, industrial health and safety, indoor air quality, and automobile exhaust emissions monitoring. Previously, Ion Optics, Inc. reported on a new design concept exploiting Si-based suspended micro-bridge structures. The devices are fabricated using conventional CMOS compatible processes. The use of photonic bandgap (PBG) crystals enables narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 micrometers wavelength range. Prototype designs explored suspension architectures and filament geometries. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO2 gas sensitivity limits are reported.

Conductivity for soot sensing: possibilities and limitations.

PubMed

Grob, Benedikt; Schmid, Johannes; Ivleva, Natalia P; Niessner, Reinhard

2012-04-17

In this study we summarize the possibilities and limitations of a conductometric measurement principle for soot sensing. The electrical conductivity of different carbon blacks (FW 200, lamp black 101, Printex 30, Printex U, Printex XE2, special black 4, and special black 6), spark discharge soot (GfG), and graphite powder was measured by a van der Pauw arrangement. Additionally the influence of inorganic admixtures on the conductivity of carbonaceous materials was proven to follow the percolation theory. Structural and oxidation characteristics obtained with Raman microspectroscopy and temperature programmed oxidation, respectively, were correlated with the electrical conductivity data. Moreover, a thermophoretic precipitator has been applied to deposit soot particles from the exhaust stream between interdigital electrodes. This combines a controlled and size independent particle collection method with the conductivity measurement principle. A test vehicle was equipped with the AVL Micro Soot Sensor (photoacoustic soot sensor) to prove the conductometric sensor principle with an independent and reliable technique. Our results demonstrate promising potential of the conductometric sensor for on-board particle diagnostic. Furthermore this sensor can be applied as a simple, rapid, and cheap analytical tool for characterization of soot structure.

Interfacing Issues in Microcooling of Optical Detectors in Space Applications

NASA Astrophysics Data System (ADS)

Derking, J. H.; ter Brake, H. J. M.; Linder, M.; Rogalla, H.

2010-04-01

Miniature Joule-Thomson coolers were developed at the University of Twente and are able to cool to 100 K with a typical cooling power of 10 to 20 mW. These coolers have a high potential for space applications in cooling small optical detectors for future earth observation and science missions. Under contract of the European Space Agency, we investigate on-chip detector cooling for the temperature range 70 K-250 K. To identify the detectors that can be cooled by a JT microcooler, a literature survey was performed. Following this survey, we selected a micro digital CMOS image sensor. A conceptual design of this cooler-sensor system is made. Among various techniques, indium soldering and silver paint are chosen for the bonding of the silicon sensor to the glass microcooler. Electrical connections from the sensor to the outside will be realized by structuring them in a thin layer of gold that is sputtered on the outside of the cooler to minimize the radiative heat load. For the electrical connections between the sensor and the structured leads, aluminum or gold bond wires will be used.

A MEMS torsion magnetic sensor with reflective blazed grating integration

NASA Astrophysics Data System (ADS)

Long, Liang; Zhong, Shaolong

2016-07-01

A novel magnetic sensor based on a permanent magnet and blazed grating is presented in this paper. The magnetic field is detected by measuring the diffracted wavelength of the blazed grating which is changed by the torsion motion of a torsion sensitive micro-electromechanical system (MEMS) structure with a permanent magnet attached. A V-shape grating structure is obtained by wet etching on a (1 0 0) SOI substrate. When the magnet is magnetized in different directions, the in-plane or out-of-plane magnetic field is detected by a sensor. The MEMS magnetic sensor with a permanent magnet is fabricated after analytical design and bulk micromachining processes. The magnetic-sensing capability of the sensor is tested by fiber-optic detection system. The result shows the sensitivities of the in-plane and out-of-plane magnetic fields are 3.6 pm μT-1 and 5.7 pm μT-1, respectively. Due to utilization of the permanent magnet and fiber-optic detection, the sensor shows excellent capability of covering the high-resolution detection of low-frequency signals. In addition, the sensitive direction of the magnetic sensor can be easily switched by varying the magnetized direction of the permanent magnet, which offers a simple way to achieve tri-axis magnetic sensor application.

Micro-Optical Distributed Sensors for Aero Propulsion Applications

NASA Astrophysics Data System (ADS)

Arnold, S.; Otugen, V.

2003-01-01

The objective of this research is to develop micro-opto-mechanical system (MOMS)-based sensors for time- and space-resolved measurements of flow properties in aerodynamics applications. The measurement technique we propose uses optical resonances in dielectric micro-spheres that can be excited by radiation tunneling from optical fibers. It exploits the tunneling-induced and morphology-dependent shifts in the resonant frequencies. The shift in the resonant frequency is dependent on the size, shape, and index of refraction of the micro-sphere. A physical change in the environment surrounding a micro-bead can change one or more of these properties of the sphere thereby causing a shift in frequency of resonance. The change of the resonance frequency can be detected with high resolution by scanning a frequency-tunable laser that is coupled into the fiber and observing the transmission spectrum at the output of the fiber. It is expected that, in the future, the measurement concept will lead to a system of distributed micro-sensors providing spatial data resolved in time and space. The present project focuses on the development and demonstration of temperature sensors using the morphology-dependent optical resonances although in the latter part of the work, we will also develop a pressure sensor. During the period covered in this report, the optical and electronic equipment necessary for the experimental work was assembled and the experimental setup was designed for the single sensor temperature measurements. Software was developed for real-time tracking of the optical resonance shifts. Some preliminary experiments were also carried out to detect temperature using a single bead in a water bath.

Micro-optical Distributed Sensors for Aero Propulsion Applications

NASA Technical Reports Server (NTRS)

Arnold, S.; Otugen, V.; Seasholtz, Richard G. (Technical Monitor)

2003-01-01

The objective of this research is to develop micro-opto-mechanical system (MOMS)-based sensors for time- and space-resolved measurements of flow properties in aerodynamics applications. The measurement technique we propose uses optical resonances in dielectric micro-spheres that can be excited by radiation tunneling from optical fibers. It exploits the tunneling-induced and morphology-dependent shifts in the resonant frequencies. The shift in the resonant frequency is dependent on the size, shape, and index of refraction of the micro-sphere. A physical change in the environment surrounding a micro-bead can change one or more of these properties of the sphere thereby causing a shift in frequency of resonance. The change of the resonance frequency can be detected with high resolution by scanning a frequency-tunable laser that is coupled into the fiber and observing the transmission spectrum at the output of the fiber. It is expected that, in the future, the measurement concept will lead to a system of distributed micro-sensors providing spatial data resolved in time and space. The present project focuses on the development and demonstration of temperature sensors using the morphology-dependent optical resonances although in the latter part of the work, we will also develop a pressure sensor. During the period covered in this report, the optical and electronic equipment necessary for the experimental work was assembled and the experimental setup was designed for the single sensor temperature measurements. Software was developed for real-time tracking of the optical resonance shifts. Some preliminary experiments were also carried out to detect temperature using a single bead in a water bath.

Development of a Fiber-Optics Microspatially Offset Raman Spectroscopy Sensor for Probing Layered Materials.

PubMed

Vandenabeele, Peter; Conti, Claudia; Rousaki, Anastasia; Moens, Luc; Realini, Marco; Matousek, Pavel

2017-09-05

Microspatially offset Raman spectroscopy (micro-SORS) has been proposed as a valuable approach to sample molecular information from layers that are covered by a turbid (nontransparent) layer. However, when large magnifications are involved, the approach is not straightforward, as spatial constraints exist to position the laser beam and the objective lens with the external beam delivery or, with internal beam delivery, the maximum spatial offset achievable is restricted. To overcome these limitations, we propose here a prototype of a new micro-SORS sensor, which uses bare glass fibers to transfer the laser radiation to the sample and to collect the Raman signal from a spatially offset zone to the Raman spectrometer. The concept also renders itself amenable to remote delivery and to the miniaturization of the probe head which could be beneficial for special applications, e.g., where access to sample areas is restricted. The basic applicability of this approach was demonstrated by studying several layered structure systems. Apart from proving the feasibility of the technique, also, practical aspects of the use of the prototype sensor are discussed.

[Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator].

PubMed

Tang, Jun; Lei, Long-hai; Zhang, Wei; Zhang, Tian-en; Xue, Chen-yang; Zhang, Wen-dong; Liu, Jun

2016-03-01

Optical micro-ring resonator prepared on Silicon-On-Insulator (SOI) has high sensitivity, small size and low mode volume. Its high sensitivity has been widely applied to the optical information transmission and inertial navigation devices field, while it is rarely applied in the testing of Mechanics. This paper presents a cantilever stress/strain gauge with an optical microring resonator. It is proposed the using of radius change of ring waveguide for the sensing element. When external stress is put on the structure, the radius of the SOI ring waveguide will be subjected to variation, which causes the optical resonant parameters to change. This ultimately leads to a red-shift of resonant spectrum, and shows the excellent characteristics of the structure's stress/strain sensitivity. Designed a bicyclic cascade embedded optical micro-cavity structure, which was prepared by employing MEMS lithography and ICP etching process. The characteristic of stress/strain sensitivity was calculated theoretically. Two values of 0.185 pm x kPa(-1) and 18.04 pm x microstrain(-1) were obtained experimentally, which also was verified by theoretical simulations. Comparing with the single-loop micro-cavity structure, its measuring range and stress sensitivity increased by nearly 50.3%, 10.6%, respectively. This paper provides a new method to develop micro-opto-electromechanical system (MOEMS) sensors.

Comprehensive and critical literature review on insitu micro-sensors for application in tribology

NASA Astrophysics Data System (ADS)

Ling, Frederick F.; Wang, Ning; Murray, S. F.

1994-04-01

Two filters have been invoked in this survey of literature on sensors: (1) only those which might have relevance, direct or potential, to machinery condition sensing are included; (2) only those which might lend themselves to, presently or potentially, fiber-optical mode of information transmission are included. 190 records were selected to review from the 28,000 found using the University of Texas at Austin's U-Search and the Engineering Index, augmented by several commercial data bases, under LITERATURE ON SENSORS. Throughout, a sensor or transducer is understood to be a device that provides a usable output in response to a specific measurand; it is understood that such devices are called different names in different fields. This project has a highly restricted scope. The goal of the project concerns chemical as well as physical sensors of micro-dimension pertaining to lubricated contacts as to abrasive wear, friction, corrosive wear, cracks, micro-partile analysis, identification of surface film formation, load, miro-particle detection, position, speed, surface damage, and temperature. A research need analysis was proposed in anticipation of the aforementioned fact that few sensors in this context would be in-situ, let alone being of micro-dimension.

Smart focal-plane technology for micro-instruments and micro-rovers

NASA Technical Reports Server (NTRS)

Fossum, Eric R.

1993-01-01

It is inevitable that micro-instruments and micro-rovers for space exploration will contain one or more focal-plane arrays for imaging, spectroscopy, or navigation. In this paper, we explore the state-of-the-art in focal-plane technology for visible sensors. Also discussed is present research activity in advanced focal-plane technology with particular emphasis on the development of smart sensors. The paper concludes with a discussion of possible future directions for the advancement of the technology.

Design of an ultrasonic micro-array for near field sensing during retinal microsurgery.

PubMed

Clarke, Clyde; Etienne-Cummings, Ralph

2006-01-01

A method for obtaining the optimal and specific sensor parameters for a tool-tip mountable ultrasonic transducer micro-array is presented. The ultrasonic transducer array sensor parameters, such as frequency of operation, element size, inter-element spacing, number of elements and transducer geometry are obtained using a quadratic programming method to obtain a maximum directivity while being constrained to a total array size of 4 mm2 and the required resolution for retinal imaging. The technique is used to design a uniformly spaced NxN transducer array that is capable of resolving structures in the retina that are as small as 2 microm from a distance of 100 microm. The resultant 37x37 array of 16 microm transducers with 26 microm spacing will be realized as a Capacitive Micromachined Ultrasonic Transducer (CMUT) array and used for imaging and robotic guidance during retinal microsurgery.

Events as power source: wireless sustainable corrosion monitoring.

PubMed

Sun, Guodong; Qiao, Guofu; Zhao, Lin; Chen, Zhibo

2013-12-17

This study presents and implements a corrosion-monitoring wireless sensor platform, EPS (Events as Power Source), which monitors the corrosion events in reinforced concrete (RC) structures, while being powered by the micro-energy released from the corrosion process. In EPS, the proposed corrosion-sensing device serves both as the signal source for identifying corrosion and as the power source for driving the sensor mote, because the corrosion process (event) releases electric energy; this is a novel idea proposed by this study. For accumulating the micro-corrosion energy, we integrate EPS with a COTS (Commercial Off-The-Shelf) energy-harvesting chip that recharges a supercapacitor. In particular, this study designs automatic energy management and adaptive transmitted power control polices to efficiently use the constrained accumulated energy. Finally, a set of preliminary experiments based on concrete pore solution are conducted to evaluate the feasibility and the efficacy of EPS.

In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor

PubMed Central

Lee, Chi-Yuan; Weng, Fang-Bor; Kuo, Yzu-Wei; Tsai, Chao-Hsuan; Cheng, Yen-Ting; Cheng, Chih-Kai; Lin, Jyun-Ting

2016-01-01

In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and nonuniform fuel distribution, thus influencing the performance and lifetime of the fuel cell stack. In this paper micro-electro-mechanical systems (MEMS) are utilized to develop a high-temperature electrochemical environment-resistant five-in-one micro-sensor embedded in the cathode channel plate of an HT-PEMFC stack, and materials and process parameters are appropriately selected to protect the micro-sensor against failure or destruction during long-term operation. In-situ measurement of the local temperature, voltage, pressure, flow and current distributions in the HT-PEMFC stack is carried out. This integrated micro-sensor has five functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and the goal is being able to be put in any place for measurement without affecting the performance of the battery. PMID:27763559

In-Situ Measurement of High-Temperature Proton Exchange Membrane Fuel Cell Stack Using Flexible Five-in-One Micro-Sensor.

PubMed

Lee, Chi-Yuan; Weng, Fang-Bor; Kuo, Yzu-Wei; Tsai, Chao-Hsuan; Cheng, Yen-Ting; Cheng, Chih-Kai; Lin, Jyun-Ting

2016-10-18

In the chemical reaction that proceeds in a high-temperature proton exchange membrane fuel cell stack (HT-PEMFC stack), the internal local temperature, voltage, pressure, flow and current nonuniformity may cause poor membrane material durability and nonuniform fuel distribution, thus influencing the performance and lifetime of the fuel cell stack. In this paper micro-electro-mechanical systems (MEMS) are utilized to develop a high-temperature electrochemical environment-resistant five-in-one micro-sensor embedded in the cathode channel plate of an HT-PEMFC stack, and materials and process parameters are appropriately selected to protect the micro-sensor against failure or destruction during long-term operation. In-situ measurement of the local temperature, voltage, pressure, flow and current distributions in the HT-PEMFC stack is carried out. This integrated micro-sensor has five functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and the goal is being able to be put in any place for measurement without affecting the performance of the battery.

Micro guidance and control synthesis: New components, architectures, and capabilities

NASA Technical Reports Server (NTRS)

Mettler, Edward; Hadaegh, Fred Y.

1993-01-01

New GN&C (guidance, navigation and control) system capabilities are shown to arise from component innovations that involve the synergistic use of microminiature sensors and actuators, microelectronics, and fiber optics. Micro-GN&C system and component concepts are defined that include micro-actuated adaptive optics, micromachined inertial sensors, fiber-optic data nets and light-power transmission, and VLSI microcomputers. The thesis is advanced that these micro-miniaturization products are capable of having a revolutionary impact on space missions and systems, and that GN&C is the pathfinder micro-technology application that can bring that about.

Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range

NASA Astrophysics Data System (ADS)

Courbat, J.; Canonica, M.; Teyssieux, D.; Briand, D.; de Rooij, N. F.

2011-01-01

The design of ultra-low power micro-hotplates on a polyimide (PI) substrate supported by thermal simulations and characterization is presented. By establishing a method for the thermal simulation of very small scale heating elements, the goal of this study was to decrease the power consumption of PI micro-hotplates to a few milliwatts to make them suitable for very low power applications. To this end, the mean heat transfer coefficients in air of the devices were extracted by finite element analysis combined with very precise thermographic measurements. A simulation model was implemented for these hotplates to investigate both the influence of their downscaling and the bulk micromachining of the polyimide substrate to lower their power consumptions. Simulations were in very good agreement with the experimental results. The main parameters influencing significantly the power consumption at such dimensions were identified and guidelines were defined allowing the design of very small (15 × 15 µm) and ultra-low power heating elements (6 mW at 300 °C). These very low power heating structures enable the realization of flexible sensors, such as gas, flow or wind sensors, for applications in autonomous wireless sensors networks or RFID applications and make them compatible with large-scale production on foil such as roll-to-roll or printing processes.

Optical fiber sensor having a sol-gel fiber core and a method of making

DOEpatents

Tao, Shiquan; Jindal, Rajeev; Winstead, Christopher; Singh, Jagdish P.

2006-06-06

A simple, economic wet chemical procedure is described for making sol-gel fibers. The sol-gel fibers made from this process are transparent to ultraviolet, visible and near infrared light. Light can be guided in these fibers by using an organic polymer as a fiber cladding. Alternatively, air can be used as a low refractive index medium. The sol-gel fibers have a micro pore structure which allows molecules to diffuse into the fiber core from the surrounding environment. Chemical and biochemical reagents can be doped into the fiber core. The sol-gel fiber can be used as a transducer for constructing an optical fiber sensor. The optical fiber sensor having an active sol-gel fiber core is more sensitive than conventional evanescent wave absorption based optical fiber sensors.

Surface biofunctionalization and production of miniaturized sensor structures using aerosol printing technologies.

PubMed

Grunwald, Ingo; Groth, Esther; Wirth, Ingo; Schumacher, Julian; Maiwald, Marcus; Zoellmer, Volker; Busse, Matthias

2010-03-01

The work described in this paper demonstrates that very small protein and DNA structures can be applied to various substrates without denaturation using aerosol printing technology. This technology allows high-resolution deposition of various nanoscaled metal and biological suspensions. Before printing, metal and biological suspensions were formulated and then nebulized to form an aerosol which is aerodynamically focused on the printing module of the system in order to achieve precise structuring of the nanoscale material on a substrate. In this way, it is possible to focus the aerosol stream at a distance of about 5 mm from the printhead to the surface. This technology is useful for printing fluorescence-marked proteins and printing enzymes without affecting their biological activity. Furthermore, higher molecular weight DNA can be printed without shearing. The advantages, such as printing on complex, non-planar 3D structured surfaces, and disadvantages of the aerosol printing technology are also discussed and are compared with other printing technologies. In addition, miniaturized sensor structures with line thicknesses in the range of a few micrometers are fabricated by applying a silver sensor structure to glass. After sintering using an integrated laser or in an oven process, electrical conductivity is achieved within the sensor structure. Finally, we printed BSA in small micrometre-sized areas within the sensor structure using the same deposition system. The aerosol printing technology combined with material development offers great advantages for future-oriented applications involving biological surface functionalization on small areas. This is important for innovative biomedical micro-device development and for production solutions which bridge the disciplines of biology and electronics.

A micro-machined piezoelectric flexural-mode hydrophone with air backing: a hydrostatic pressure-balancing mechanism for integrity preservation.

PubMed

Choi, Sungjoon; Lee, Haksue; Moon, Wonkyu

2010-09-01

Although an air-backed thin plate is an effective sound receiver structure, it is easily damaged via pressure unbalance caused by external hydrostatic pressure. To overcome this difficulty, a simple pressure-balancing module is proposed. Despite its small size and relative simplicity, with proper design and operation, micro-channel structure provides a solution to the pressure-balancing problem. If the channel size is sufficiently small, the gas-liquid interface may move back and forth without breach by the hydrostatic pressure since the surface tension can retain the interface surface continuously. One input port of the device is opened to an intermediate liquid, while the other port is connected to the air-backing chamber. As the hydrostatic pressure increases, the liquid in the micro-channel compresses the air, and the pressure in the backing chamber is then equalized to match the external hydrostatic pressure. To validate the performance of the proposed mechanism, a micro-channel prototype is designed and integrated with the piezoelectric micro-machined flexural sensor developed in our previous work. The working principle of the mechanism is experimentally verified. In addition, the effect of hydrostatic pressure on receiving sensitivity is evaluated and compared with predicted behavior.

Army requirements for micro and nanotechnology-based sensors in weapons health and battlefield environmental monitoring applications

NASA Astrophysics Data System (ADS)

Ruffin, Paul; Brantley, Christina; Edwards, Eugene; Hutcheson, Guilford

2006-03-01

The Army Aviation and Missile Research, Development, and Engineering Center (AMRDEC) and the Army Research Laboratory (ARL) have initiated a joint advanced technology demonstration program entitled "Prognostics/Diagnostics for the Future Force (PDFF)" with a key objective of developing low or no power embedded sensor suites for harsh environmental monitoring. The most critical challenge of the program is to specify requirements for the embedded sensor suites which will perform on-board diagnostics, maintain a history of sensor data, and forecast weapon health. The authors are currently collaborating with the PDFF program managers and potential customers to quantify the requirements for remotely operated, micro/nano-technology-based sensors for a host of candidate weapon systems. After requirements are finalized, current micro/nanotechnology-based temperature, humidity, g-shock, vibration and chemical sensors for monitoring the out-gassing of weapons propellant, as well as hazardous gaseous species on the battlefield and in urban environments will be improved to meet the full requirements of the PDFF program. In this paper, performance requirements such as power consumption, reliability, maintainability, survivability, size, and cost, along with the associated technical challenges for micro/nanotechnology-based sensor systems operating in military environments, are discussed. In addition, laboratory results from the design and testing of a wireless sensor array, which was developed using a thin film of functionalized carbon nanotube materials, are presented. Conclusions from the research indicate that the detection of bio-hazardous materials is possible using passive and active wireless sensors based on monitoring the reflected phase from the sensor.

Sensing of single electrons using micro and nano technologies: a review

NASA Astrophysics Data System (ADS)

Jalil, Jubayer; Zhu, Yong; Ekanayake, Chandima; Ruan, Yong

2017-04-01

During the last three decades, the remarkable dynamic features of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), and advances in solid-state electronics hold much potential for the fabrication of extremely sensitive charge sensors. These sensors have a broad range of applications, such as those involving the measurement of ionization radiation, detection of bio-analyte and aerosol particles, mass spectrometry, scanning tunneling microscopy, and quantum computation. Designing charge sensors (also known as charge electrometers) for electrometry is deemed significant because of the sensitivity and resolution issues in the range of micro- and nano-scales. This article reviews the development of state-of-the-art micro- and nano-charge sensors, and discusses their technological challenges for practical implementation.

Photocatalytically Renewable Micro-electrochemical Sensor for Real-Time Monitoring of Cells.

PubMed

Xu, Jia-Quan; Liu, Yan-Ling; Wang, Qian; Duo, Huan-Huan; Zhang, Xin-Wei; Li, Yu-Tao; Huang, Wei-Hua

2015-11-23

Electrode fouling and passivation is a substantial and inevitable limitation in electrochemical biosensing, and it is a great challenge to efficiently remove the contaminant without changing the surface structure and electrochemical performance. Herein, we propose a versatile and efficient strategy based on photocatalytic cleaning to construct renewable electrochemical sensors for cell analysis. This kind of sensor was fabricated by controllable assembly of reduced graphene oxide (RGO) and TiO2 to form a sandwiching RGO@TiO2 structure, followed by deposition of Au nanoparticles (NPs) onto the RGO shell. The Au NPs-RGO composite shell provides high electrochemical performance. Meanwhile, the encapsulated TiO2 ensures an excellent photocatalytic cleaning property. Application of this renewable microsensor for detection of nitric oxide (NO) release from cells demonstrates the great potential of this strategy in electrode regeneration and biosensing. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Design of a microfluidic sensor for high-sensitivity Copper (II) sensing applications

NASA Astrophysics Data System (ADS)

Gibson, Ceri; Byrne, Patrick; Gray, David; MacCraith, Brian D.; Paull, Brett; Tyrrell, Eadaoin

2003-03-01

An all-plastic micro-sensor system for remote measurement of copper (II) ions in the aqueous environment has been developed. The sensing structure was designed for ease of milling and fabricated in poly (methyl methacrylate) (PMMA) using a hot-embossing technique. Issues of sealing the structure were studied extensively and an efficient protocol has been established. The detection system comprises a compact photo-multiplier tube and integrated photon counting system. This method has advantages of low sample volume, (creating a minimal volume of waste), low exposure to contaminants due to the closed system, no moving parts and employs a robust polymer material which is resistant to the environment of intended use. The sensor operates on the principle of flow injection analysis and has been tested using a chemiluminescence (FIA-CL) reaction arising from the complexation of copper with 1,10-phenanthroline and subsequent oxidation by hydrogen peroxide.

Micro-satellite for space debris observation by optical sensors

NASA Astrophysics Data System (ADS)

Thillot, Marc; Brenière, Xavier; Midavaine, Thierry

2017-11-01

The purpose of this theoretical study carried out under CNES contract is to analyze the feasibility of small space debris detection and classification with an optical sensor on-board micro-satellite. Technical solutions based on active and passive sensors are analyzed and compared. For the most appropriated concept an optimization was made and theoretical performances in terms of number of detection versus class of diameter were calculated. Finally we give some preliminary physical sensor features to illustrate the concept (weight, volume, consumption,…).

Micro-Pressure Sensors for Future Mars Missions

NASA Technical Reports Server (NTRS)

Catling, David C.

1996-01-01

The joint research interchange effort was directed at the following principal areas: u further development of NASA-Ames' Mars Micro-meteorology mission concept as a viable NASA space mission especially with regard to the science and instrument specifications u interaction with the flight team from NASA's New Millennium 'Deep-Space 2' (DS-2) mission with regard to selection and design of micro-pressure sensors for Mars u further development of micro-pressure sensors suitable for Mars The research work undertaken in the course of the Joint Research Interchange should be placed in the context of an ongoing planetary exploration objective to characterize the climate system on Mars. In particular, a network of small probes globally-distributed on the surface of the planet has often been cited as the only way to address this particular science goal. A team from NASA Ames has proposed such a mission called the Micrometeorology mission, or 'Micro-met' for short. Surface pressure data are all that are required, in principle, to calculate the Martian atmospheric circulation, provided that simultaneous orbital measurements of the atmosphere are also obtained. Consequently, in the proposed Micro-met mission a large number of landers would measure barometric pressure at various locations around Mars, each equipped with a micro-pressure sensor. Much of the time on the JRI was therefore spent working with the engineers and scientists concerned with Micro-met to develop this particular mission concept into a more realistic proposition.

The selectable hyperspectral airborne remote sensing kit (SHARK) as an enabler for precision agriculture

NASA Astrophysics Data System (ADS)

Holasek, Rick; Nakanishi, Keith; Ziph-Schatzberg, Leah; Santman, Jeff; Woodman, Patrick; Zacaroli, Richard; Wiggins, Richard

2017-04-01

Hyperspectral imaging (HSI) has been used for over two decades in laboratory research, academic, environmental and defense applications. In more recent time, HSI has started to be adopted for commercial applications in machine vision, conservation, resource exploration, and precision agriculture, to name just a few of the economically viable uses for the technology. Corning Incorporated (Corning) has been developing and manufacturing HSI sensors, sensor systems, and sensor optical engines, as well as HSI sensor components such as gratings and slits for over a decade and a half. This depth of experience and technological breadth has allowed Corning to design and develop unique HSI spectrometers with an unprecedented combination of high performance, low cost and low Size, Weight, and Power (SWaP). These sensors and sensor systems are offered with wavelength coverage ranges from the visible to the Long Wave Infrared (LWIR). The extremely low SWaP of Corning's HSI sensors and sensor systems enables their deployment using limited payload platforms such as small unmanned aerial vehicles (UAVs). This paper discusses use of the Corning patented monolithic design Offner spectrometer, the microHSI™, to build a highly compact 400-1000 nm HSI sensor in combination with a small Inertial Navigation System (INS) and micro-computer to make a complete turn-key airborne remote sensing payload. This Selectable Hyperspectral Airborne Remote sensing Kit (SHARK) has industry leading SWaP (1.5 lbs) at a disruptively low price due, in large part, to Corning's ability to manufacture the monolithic spectrometer out of polymers (i.e. plastic) and therefore reduce manufacturing costs considerably. The other factor in lowering costs is Corning's well established in house manufacturing capability in optical components and sensors that further enable cost-effective fabrication. The competitive SWaP and low cost of the microHSI™ sensor is approaching, and in some cases less than the price point of Multi Spectral Imaging (MSI) sensors. Specific designs of the Corning microHSI™ SHARK visNIR turn-key system are presented along with salient performance characteristics. Initial focus market areas include precision agriculture and historic and recent microHSI™ SHARK prototype test results are presented.

Design of a Micro Cable Tunnel Inspection Robot

NASA Astrophysics Data System (ADS)

Song, Wei; Liu, Lei; Zhou, Xiaolong; Wang, Chengjiang

2016-11-01

As the ventilation system in cable tunnel is not perfect and the environment is closed, it is easy to accumulate toxic and harmful gas. It is a serious threat to the life safety of inspection staff. Therefore, a micro cable tunnel inspection robot is designed. The whole design plan mainly includes two parts: mechanical structure design and control system design. According to the functional requirements of the tunnel inspection robot, a wheel arm structure with crawler type is proposed. Some sensors are used to collect temperature, gas and image and transmit the information to the host computer in real time. The result shows the robot with crawler wheel arm structure has the advantages of small volume, quick action and high performance-price ratio. Besides, it has high obstacle crossing and avoidance ability and can adapt to a variety of complex cable tunnel environment.

Micro-machined thin film hydrogen gas sensor, and method of making and using the same

NASA Technical Reports Server (NTRS)

DiMeo, Jr., Frank (Inventor); Bhandari, Gautam (Inventor)

2001-01-01

A hydrogen sensor including a thin film sensor element formed, e.g., by metalorganic chemical vapor deposition (MOCVD) or physical vapor deposition (PVD), on a microhotplate structure. The thin film sensor element includes a film of a hydrogen-interactive metal film that reversibly interacts with hydrogen to provide a correspondingly altered response characteristic, such as optical transmissivity, electrical conductance, electrical resistance, electrical capacitance, magnetoresistance, photoconductivity, etc., relative to the response characteristic of the film in the absence of hydrogen. The hydrogen-interactive metal film may be overcoated with a thin film hydrogen-permeable barrier layer to protect the hydrogen-interactive film from deleterious interaction with non-hydrogen species. The hydrogen sensor of the invention may be usefully employed for the detection of hydrogen in an environment susceptible to the incursion or generation of hydrogen and may be conveniently configured as a hand-held apparatus.

CNT coated thread micro-electro-mechanical system for finger proprioception sensing

NASA Astrophysics Data System (ADS)

Shafi, A. A.; Wicaksono, D. H. B.

2017-04-01

In this paper, we aim to fabricate cotton thread based sensor for proprioceptive application. Cotton threads are utilized as the structural component of flexible sensors. The thread is coated with multi-walled carbon nanotube (MWCNT) dispersion by using facile conventional dipping-drying method. The electrical characterization of the coated thread found that the resistance per meter of the coated thread decreased with increasing the number of dipping. The CNT coated thread sensor works based on piezoresistive theory in which the resistance of the coated thread changes when force is applied. This thread sensor is sewed on glove at the index finger between middle and proximal phalanx parts and the resistance change is measured upon grasping mechanism. The thread based microelectromechanical system (MEMS) enables the flexible sensor to easily fit perfectly on the finger joint and gives reliable response as proprioceptive sensing.

A new amperometric nanostructured sensor for the analytical determination of hydrogen peroxide.

PubMed

Guascito, M R; Filippo, E; Malitesta, C; Manno, D; Serra, A; Turco, A

2008-12-01

A new amperometric, nanostructured sensor for the analytical determination of hydrogen peroxide is proposed. This sensor was constructed by immobilizing silver nanoparticles in a polyvinyl alcohol (PVA) film on a platinum electrode, which was performed by direct drop-casting silver nanoparticles that were capped in a PVA colloidal suspension. UV-vis spectroscopy, X-ray diffraction and transmission electron microscopy were used to give a complete characterization of the nanostructured film. Cyclic voltammetry experiments yielded evidence that silver nanoparticles facilitate hydrogen peroxide reduction, showing excellent catalytic activity. Moreover, the cronoamperometric response of modified sensors was dependent on nanoparticle lifetime. Experiments were performed, using freshly prepared solutions, after 4 and 8 days. Results concerning the quantitative analysis of hydrogen peroxide, in terms of detection limit, linear range, sensitivity and standard deviation (STD), are discussed for each tested sensor type. Utilization of two different linear ranges (40 microM to 6mM and 1.25 microM to 1.0mM) enabled the assessment of concentration intervals having up to three orders of magnitude. Moreover, the electrode made using a 4-day-old solution showed the maximal sensitivity of 128 nA microM(-1)(4090 nA microM(-1)cm(-2)), yielding a limit of detection of 1 microuM and STD of 2.5 microAmM(-1). All of these analytical parameters make the constructed sensors suitable for peroxide determination in aqueous solution.

Fabrication of a sensing module using micromachined biosensors.

PubMed

Suzuki, H; Arakawa, H; Karube, I

2001-12-01

Micromachining is a powerful tool in constructing micro biosensors and micro systems which incorporate them. A sensing module for blood components was fabricated using the technology. The analytes include glucose, urea, uric acid, creatine, and creatinine. Transducers used to construct the corresponding sensors were a Severinghaus-type carbon dioxide electrode for the urea sensor and a Clark-type oxygen electrode for the other analytes. In these electrodes, detecting electrode patterns were formed on a glass substrate by photolithography and the micro container for the internal electrolyte solution was formed on a silicon substrate by anisotropic etching. A through-hole was formed in the sensitive area, where a silicone gas-permeable membrane was formed and an enzyme was immobilized. The sensors were characterized in terms of pH and temperature dependence and calibration curves along with detection limits. Furthermore, the sensors were incorporated in an acrylate flow cell. Simultaneous operation of these sensors was successfully conducted and distinct and stable responses were observed for respective sensors.

A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations

PubMed Central

Chen, Lianhong; Sun, Zhenyuan; Li, Guanglei; Chen, Deyong; Wang, Junbo

2018-01-01

A monolithic electrochemical micro seismic sensor capable of monitoring three-axial vibrations was proposed in this paper. The proposed micro sensor mainly consisted of four sensing units interconnected within flow channels and by interpreting the voltage outputs of the sensing units, vibrations with arbitrary directions can be quantified. The proposed seismic sensors are fabricated based on MEMS technologies and characterized, which produced sensitivities along x, y, and z axes as 2473.2 ± 184.5 V/(m/s), 2261.7 ± 119.6 V/(m/s), and 3480.7 ± 417.2 V/(m/s) at 30 Hz. In addition, the vibrations in x-y, x-z, and y-z planes were applied to the developed seismic sensors, leading to comparable monitoring results after decoupling calculations with the input velocities. Furthermore, the results have shown its feasibilities for seismic data recording. PMID:29614720

High capacity fiber optic sensor networks using hybrid multiplexing techniques and their applications

NASA Astrophysics Data System (ADS)

Sun, Qizhen; Li, Xiaolei; Zhang, Manliang; Liu, Qi; Liu, Hai; Liu, Deming

2013-12-01

Fiber optic sensor network is the development trend of fiber senor technologies and industries. In this paper, I will discuss recent research progress on high capacity fiber sensor networks with hybrid multiplexing techniques and their applications in the fields of security monitoring, environment monitoring, Smart eHome, etc. Firstly, I will present the architecture of hybrid multiplexing sensor passive optical network (HSPON), and the key technologies for integrated access and intelligent management of massive fiber sensor units. Two typical hybrid WDM/TDM fiber sensor networks for perimeter intrusion monitor and cultural relics security are introduced. Secondly, we propose the concept of "Microstructure－Optical X Domin Refecltor (M-OXDR)" for fiber sensor network expansion. By fabricating smart micro-structures with the ability of multidimensional encoded and low insertion loss along the fiber, the fiber sensor network of simple structure and huge capacity more than one thousand could be achieved. Assisted by the WDM/TDM and WDM/FDM decoding methods respectively, we built the verification systems for long-haul and real-time temperature sensing. Finally, I will show the high capacity and flexible fiber sensor network with IPv6 protocol based hybrid fiber/wireless access. By developing the fiber optic sensor with embedded IPv6 protocol conversion module and IPv6 router, huge amounts of fiber optic sensor nodes can be uniquely addressed. Meanwhile, various sensing information could be integrated and accessed to the Next Generation Internet.

Metallic Bead Detection by Using Eddy-Current Probe with SV-GMR Sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yamada, S.; Chomsuwan, K.; Hagino, T.

2005-04-09

The progress of the ECT probe with micro magnetic sensor becomes possible to apply to various applications. The detection of micro metallic bead used for electric packaging has been reported in this paper. We proposed micro ECT probes with meander coil as exciter and spin-valve giant magneto-resistance (SV-GMR) as receiver. Micro metallic bead(solder ball) with the diameter of 0.25 to 0.76 mm is used as a measuring object. We discuss the detection and alignment of metallic bead by using ECT technique.

Measurement of Gas-Liquid Two-Phase Flow in Micro-Pipes by a Capacitance Sensor

PubMed Central

Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing

2014-01-01

A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes. PMID:25587879

Measurement of gas-liquid two-phase flow in micro-pipes by a capacitance sensor.

PubMed

Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing

2014-11-26

A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes.

Integrated thin film Si fluorescence sensor coupled with a GaN microLED for microfluidic point-of-care testing

NASA Astrophysics Data System (ADS)

Robbins, Hannah; Sumitomo, Keiko; Tsujimura, Noriyuki; Kamei, Toshihiro

2018-02-01

An integrated fluorescence sensor consisting of a SiO2/Ta2O5 multilayer optical interference filter and hydrogenated amorphous silicon (a-Si:H) pin photodiode was coupled with a GaN microLED to construct a compact fluorescence detection module for point-of-care microfluidic biochemical analysis. The combination of the small size of the GaN microLED and asymmetric microlens resulted in a focal spot diameter of the excitation light of approximately 200 µm. The limit of detection of the sensor was as high as 36 nM for fluorescein solution flowing in a 100 µm deep microfluidic channel because of the lack of directionality of the LED light. Nevertheless, we used the GaN microLED coupled with the a-Si:H fluorescence sensor to successfully detect fluorescence from a streptavidin R-phycoerythrin conjugate that bound to biotinylated antibody-coated microbeads trapped by the barrier in the microfluidic channel.

3D printing of nano- and micro-structures

NASA Astrophysics Data System (ADS)

Ramasamy, Mouli; Varadan, Vijay K.

2016-04-01

Additive manufacturing or 3D printing techniques are being vigorously investigated as a replacement to the traditional and conventional methods in fabrication to bring forth cost and time effective approaches. Introduction of 3D printing has led to printing micro and nanoscale structures including tissues and organelles, bioelectric sensors and devices, artificial bones and transplants, microfluidic devices, batteries and various other biomaterials. Various microfabrication processes have been developed to fabricate micro components and assemblies at lab scale. 3D Fabrication processes that can accommodate the functional and geometrical requirements to realize complicated structures are becoming feasible through advances in additive manufacturing. This advancement could lead to simpler development mechanisms of novel components and devices exhibiting complex features. For instance, development of microstructure electrodes that can penetrate the epidermis of the skin to collect the bio potential signal may prove very effective than the electrodes that measure signal from the skin's surface. The micro and nanostructures will have to possess extraordinary material and mechanical properties for its dexterity in the applications. A substantial amount of research being pursued on stretchable and flexible devices based on PDMA, textiles, and organic electronics. Despite the numerous advantages these substrates and techniques could solely offer, 3D printing enables a multi-dimensional approach towards finer and complex applications. This review emphasizes the use of 3D printing to fabricate micro and nanostructures for that can be applied for human healthcare.

Measuring Micro-Friction Torque in MEMS Gas Bearings

PubMed Central

Fang, Xudong; Liu, Huan

2016-01-01

An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. With appropriate installation of the sensor and bearings on the table, the engine rotor can be driven to rotate with the sensor using a silicon lever beam. One end of the beam is fixed to the shaft of the gas bearing, while the other end is free and in contact with the sensor probe tip. When the sensor begins to rotate with the table, the beam is pushed by the sensor probe to rotate in the same direction. For the beam, the friction torque from the gas bearing is balanced by the torque induced by pushing force from the sensor probe. Thus, the friction torque can be calculated as a product of the pushing force measured by the sensor and the lever arm, which is defined as the distance from the sensor probe tip to the centerline of the bearing. Experimental results demonstrate the feasibility of this system, with a sensitivity of 1.285 mV/μN·m in a range of 0 to 11.76 μN·m when the lever arm is 20 mm long. The measuring range can be modified by varying the length of the lever arm. Thus, this system has wide potential applications in measuring the micro-friction torque of gas bearings in rotating MEMS machines. PMID:27213377

A micro-Doppler sonar for acoustic surveillance in sensor networks

NASA Astrophysics Data System (ADS)

Zhang, Zhaonian

Wireless sensor networks have been employed in a wide variety of applications, despite the limited energy and communication resources at each sensor node. Low power custom VLSI chips implementing passive acoustic sensing algorithms have been successfully integrated into an acoustic surveillance unit and demonstrated for detection and location of sound sources. In this dissertation, I explore active and passive acoustic sensing techniques, signal processing and classification algorithms for detection and classification in a multinodal sensor network environment. I will present the design and characterization of a continuous-wave micro-Doppler sonar to image objects with articulated moving components. As an example application for this system, we use it to image gaits of humans and four-legged animals. I will present the micro-Doppler gait signatures of a walking person, a dog and a horse. I will discuss the resolution and range of this micro-Doppler sonar and use experimental results to support the theoretical analyses. In order to reduce the data rate and make the system amenable to wireless sensor networks, I will present a second micro-Doppler sonar that uses bandpass sampling for data acquisition. Speech recognition algorithms are explored for biometric identifications from one's gait, and I will present and compare the classification performance of the two systems. The acoustic micro-Doppler sonar design and biometric identification results are the first in the field as the previous work used either video camera or microwave technology. I will also review bearing estimation algorithms and present results of applying these algorithms for bearing estimation and tracking of moving vehicles. Another major source of the power consumption at each sensor node is the wireless interface. To address the need of low power communications in a wireless sensor network, I will also discuss the design and implementation of ultra wideband transmitters in a three dimensional silicon on insulator process. Lastly, a prototype of neuromorphic interconnects using ultra wideband radio will be presented.

One-Step Solvent Evaporation-Assisted 3D Printing of Piezoelectric PVDF Nanocomposite Structures.

PubMed

Bodkhe, Sampada; Turcot, Gabrielle; Gosselin, Frederick P; Therriault, Daniel

2017-06-21

Development of a 3D printable material system possessing inherent piezoelectric properties to fabricate integrable sensors in a single-step printing process without poling is of importance to the creation of a wide variety of smart structures. Here, we study the effect of addition of barium titanate nanoparticles in nucleating piezoelectric β-polymorph in 3D printable polyvinylidene fluoride (PVDF) and fabrication of the layer-by-layer and self-supporting piezoelectric structures on a micro- to millimeter scale by solvent evaporation-assisted 3D printing at room temperature. The nanocomposite formulation obtained after a comprehensive investigation of composition and processing techniques possesses a piezoelectric coefficient, d 31 , of 18 pC N -1 , which is comparable to that of typical poled and stretched commercial PVDF film sensors. A 3D contact sensor that generates up to 4 V upon gentle finger taps demonstrates the efficacy of the fabrication technique. Our one-step 3D printing of piezoelectric nanocomposites can form ready-to-use, complex-shaped, flexible, and lightweight piezoelectric devices. When combined with other 3D printable materials, they could serve as stand-alone or embedded sensors in aerospace, biomedicine, and robotic applications.

A Mars Micro-Meteorological Station Mission

NASA Technical Reports Server (NTRS)

Merrihew, Steven C.; Haberle, Robert; Lemke, Lawrence G.

1995-01-01

The Mars Micro-Meteorological Station (Micro-Met) Mission is designed to provide the global surface pressure measurements required to help characterize the martian general circulation and climate system. Measurements of surface pressure distributed both spatially and temporally, coupled with simultaneous measurements from orbit, will enable the determination of the general circulation, structure and driving factors of the martian atmosphere as well as the seasonal CO2 cycle. The influence of these atmospheric factors will in turn provide insight into the overall martian climate system. With the science objective defined as the long term (at least one Mars year) globally distributed measurement of surface atmospheric pressure, a straightforward, near term and low cost network mission has been designed. The Micro-Met mission utilizes a unique silicon micro-machined pressure sensor coupled with a robust and lightweight surface station to deliver to Mars 16 Micro-Met stations via a Med-Lite launch vehicle. The battery powered Micro-Met surface stations are designed to autonomously measure, record and transmit the science data via a UHF relay satellite. Entry, descent and landing is provided by an aeroshell with a new lightweight ceramic thermal protection system, a parachute and an impact absorbing structure. The robust lander is capable of surviving the landing loads imposed by the high altitude landing sites required in a global network. By trading the ability to make many measurements at a single site for the ability to make a single measurement at several sites, the Micro-Met mission design satisfies the requirement for truly global meteorological science.

Specifically and wash-free labeling of SNAP-tag fused proteins with a hybrid sensor to monitor local micro-viscosity.

PubMed

Wang, Chao; Song, Xinbo; Chen, Lingcheng; Xiao, Yi

2017-05-15

Viscosity, as one of the major factors of intracellular microenvironment, influences the function of proteins. To detect local micro-viscosity of a protein, it is a precondition to apply a viscosity sensor for specifically target to proteins. However, all the reported small-molecule probes are just suitable for sensing/imaging of macro-viscosity in biological fluids of entire cells or organelles. To this end, we developed a hybrid sensor BDP-V BG by connecting a viscosity-sensitive boron-dipyrromethene (BODIPY) molecular rotor (BDP-V) to O 6 -benzylguanine (BG) for specific detection of local micro-viscosity of SNAP-tag fused proteins. We measured and calculated the reaction efficiency between the sensor and SNAP-tag protein in vitro to confirm the high labeling specificity. We also found that the labeling reaction results in a 53-fold fluorescence enhancement for the rotor, which qualifies it as a wash-free sensor with ignorable background fluorescence. The high sensitivity of protein labeled sensor (BDP-V-SNAP) to the changes of local viscosity was evaluated by detecting the enhancement of fluorescence lifetimes. Further, with the sensor BDP-V BG, we achieved high specific labeling of cells expressing two SNAP-tag fused proteins (nuclear histone H2B and mitochondrial COX8A). Two-photon excited fluorescence lifetime imaging revealed that, the micro-viscosities nearby the SNAP-tag fused two proteins are distinct. The different changes of local micro-viscosity of SNAP-tag fused histone protein in apoptosis induced by three nucleus-targeted drugs were also characterized for the first time. Copyright © 2016 Elsevier B.V. All rights reserved.

Selected examples of intelligent (micro) sensor systems: state-of-the-art and tendencies

NASA Astrophysics Data System (ADS)

Hauptmann, Peter R.

2006-03-01

The capability of intelligent sensors to have more intelligence built into them continues to drive their application in areas including automotive, aerospace and defense, industrial, intelligent house and wear, medical and homeland security. In principle it is difficult to overestimate the importance of intelligent (micro) sensors or sensor systems within advanced societies but one characteristic feature is the global market for sensors, which is now about 20 billion annually. Therefore sensors or sensor systems play a dominant role in many fields from the macro sensor in manufacturing industry down to the miniaturized sensor for medical applications. The diversity of sensors precludes a complete description of the state-of-the-art; selected examples will illustrate the current situation. MEMS (microelectromechanical systems) devices are of special interest in the context of micro sensor systems. In past the main requirements of a sensor were in terms of metrological performance. The electrical (or optical) signal produced by the sensor needed to match the measure relatively accurately. Such basic functionality is no longer sufficient. Data processing near the sensor, the extraction of more information than just the direct sensor information by signal analysis, system aspects and multi-sensor information are the new demands. A shifting can be observed away from aiming to design perfect single-function transducers and towards the utilization of system-based sensors as system components. In the ideal case such systems contain sensors, actuators and electronics. They can be realized in monolithic, hybrid or discrete form—which kind is used depends on the application. In this article the state-of-the-art of intelligent sensors or sensor systems is reviewed using selected examples. Future trends are deduced.

High-Performance Flexible Force and Temperature Sensing Array with a Robust Structure

NASA Astrophysics Data System (ADS)

Kim, Min-Seok; Song, Han-Wook; Park, Yon-Kyu

We have developed a flexible tactile sensor array capable of sensing physical quantities, e.g. force and temperature with high-performances and high spatial resolution. The fabricated tactile sensor consists of 8 × 8 force measuring array with 1 mm spacing and a thin metal (copper) temperature sensor. The flexible force sensing array consists of sub-millimetre-size bar-shaped semi-conductor strain gage array attached to a thin and flexible printed circuit board covered by stretchable elastomeric material on both sides. This design incorporates benefits of both materials; the semi-conductor's high performance and the polymer's mechanical flexibility and robustness, while overcoming their drawbacks of those two materials. Special fabrication processes, so called “dry-transfer technique” have been used to fabricate the tactile sensor along with standard micro-fabrication processes.

Injection moulding of optical functional micro structures using laser structured, PVD-coated mould inserts

NASA Astrophysics Data System (ADS)

Hopmann, Ch.; Weber, M.; Schöngart, M.; Schäfer, C.; Bobzin, K.; Bagcivan, N.; Brögelmann, T.; Theiß, S.; Münstermann, T.; Steger, M.

2015-05-01

Micro structured optical plastics components are intensively used i. e. in consumer electronics, for optical sensors in metrology, innovative LED-lighting or laser technology. Injection moulding has proven to be successful for the large-scale production of those parts. However, the production of those parts still causes difficulties due to challenges in the moulding and demoulding of plastics parts created with laser structured mould inserts. A complete moulding of the structures often leads to increased demoulding forces, which then cause a breaking of the structures and a clogging of the mould. An innovative approach is to combine PVD-coated (physical vapour deposition), laser structured inserts and a variothermal moulding process to create functional mic8iüro structures in a one-step process. Therefore, a PVD-coating is applied after the laser structuring process in order to improve the wear resistance and the anti-adhesive properties against the plastics melt. In a series of moulding trials with polycarbonate (PC) and polymethylmethacrylate (PMMA) using different coated moulds, the mould temperature during injection was varied in the range of the glass transition and the melt temperature of the polymers. Subsequently, the surface topography of the moulded parts is evaluated by digital 3D laser-scanning microscopy. The influence of the moulding parameters and the coating of the mould insert on the moulding accuracy and the demoulding behaviour are being analysed. It is shown that micro structures created by ultra-short pulse laser ablation can be successfully replicated in a variothermal moulding process. Due to the mould coating, significant improvements could be achieved in producing micro structured optical plastics components.

Study of a high-precision SAW-MOEMS strain sensor with laser optics

NASA Astrophysics Data System (ADS)

Liu, Xinwei; Chen, Shufen; Li, Honglang; Zou, Zhengfeng; Fu, Lei; Meng, Yanbin

2015-02-01

A novel structure design of a surface acoustic wave (SAW) micro-optic-electro-mechanical-system (MOEMS) strain sensor with a light readout unit is presented in this paper. By measuring the polarization intensity ratio of the TE/TM mode outputted from the waveguide, the strain produced from an object can be measured precisely. The basic working principle of the SAW MOEMS strain sensor is introduced and the mathematical model of the strain sensor system is established. The SAW characteristics effected by the strain sensor are mathematically deduced. The coupling coefficient between the SAW modes and light modes can be calculated based on the theory of coupling modes. The conversion coefficient of polarized light modes is obtained. Due to the restrictions of the specific parameters of the device, the level of technology and the material characteristics, the sensitivity of the strain sensor system is calculated through simulation as 0.1 μɛ, with a dynamic range of 0 ~ ±50 μɛ.

An Improved Multi-Sensor Fusion Navigation Algorithm Based on the Factor Graph

PubMed Central

Zeng, Qinghua; Chen, Weina; Liu, Jianye; Wang, Huizhe

2017-01-01

An integrated navigation system coupled with additional sensors can be used in the Micro Unmanned Aerial Vehicle (MUAV) applications because the multi-sensor information is redundant and complementary, which can markedly improve the system accuracy. How to deal with the information gathered from different sensors efficiently is an important problem. The fact that different sensors provide measurements asynchronously may complicate the processing of these measurements. In addition, the output signals of some sensors appear to have a non-linear character. In order to incorporate these measurements and calculate a navigation solution in real time, the multi-sensor fusion algorithm based on factor graph is proposed. The global optimum solution is factorized according to the chain structure of the factor graph, which allows for a more general form of the conditional probability density. It can convert the fusion matter into connecting factors defined by these measurements to the graph without considering the relationship between the sensor update frequency and the fusion period. An experimental MUAV system has been built and some experiments have been performed to prove the effectiveness of the proposed method. PMID:28335570

An Improved Multi-Sensor Fusion Navigation Algorithm Based on the Factor Graph.

PubMed

Zeng, Qinghua; Chen, Weina; Liu, Jianye; Wang, Huizhe

2017-03-21

An integrated navigation system coupled with additional sensors can be used in the Micro Unmanned Aerial Vehicle (MUAV) applications because the multi-sensor information is redundant and complementary, which can markedly improve the system accuracy. How to deal with the information gathered from different sensors efficiently is an important problem. The fact that different sensors provide measurements asynchronously may complicate the processing of these measurements. In addition, the output signals of some sensors appear to have a non-linear character. In order to incorporate these measurements and calculate a navigation solution in real time, the multi-sensor fusion algorithm based on factor graph is proposed. The global optimum solution is factorized according to the chain structure of the factor graph, which allows for a more general form of the conditional probability density. It can convert the fusion matter into connecting factors defined by these measurements to the graph without considering the relationship between the sensor update frequency and the fusion period. An experimental MUAV system has been built and some experiments have been performed to prove the effectiveness of the proposed method.

Development of a shear stress sensor to analyse the influence of polymers on the turbulent wall shear stress.

PubMed

Nottebrock, Bernardo; Grosse, Sebastian; Schröder, Wolfgang

2011-05-11

The drag reducing effect of polymers in a channel flow is well known and it is assumed that the polymer filaments interfere with the turbulent structures in the very near-wall flow. To analyse their precise effect, a micro-pillar shear stress sensor (MPS³) measurement system is developed which allows the detection of wall shear stress at high spatial and temporal resolutions. Different manufacturing techniques for the required micro-pillars are discussed and their influence on the flow is investigated evidencing the non-intrusive character of the pillars. Subsequently, a complete calibration is presented to relate the recorded deflection to wall shear stress values and to assure the correct detection over the whole expected frequency spectrum. A feasibility study about the ability to visualize the two-dimensional wall shear stress distribution completes the discussion about the validity of MPS³. In the last step, the drag reduction of a polymer filament grafted on a micro-pillar compared to a plain pillar and the application of MPS³ in an ocean-type polymer solution are investigated. The results confirm the expected behaviour found in the literature.

A safety monitoring system for taxi based on CMOS imager

NASA Astrophysics Data System (ADS)

Liu, Zhi

2005-01-01

CMOS image sensors now become increasingly competitive with respect to their CCD counterparts, while adding advantages such as no blooming, simpler driving requirements and the potential of on-chip integration of sensor, analogue circuitry, and digital processing functions. A safety monitoring system for taxi based on cmos imager that can record field situation when unusual circumstance happened is described in this paper. The monitoring system is based on a CMOS imager (OV7120), which can output digital image data through parallel pixel data port. The system consists of a CMOS image sensor, a large capacity NAND FLASH ROM, a USB interface chip and a micro controller (AT90S8515). The structure of whole system and the test data is discussed and analyzed in detail.

Microelectromechanical Systems

NASA Technical Reports Server (NTRS)

Gabriel, Kaigham J.

1995-01-01

Micro-electromechanical systems (MEMS) is an enabling technology that merges computation and communication with sensing and actuation to change the way people and machines interact with the physical world. MEMS is a manufacturing technology that will impact widespread applications including: miniature inertial measurement measurement units for competent munitions and personal navigation; distributed unattended sensors; mass data storage devices; miniature analytical instruments; embedded pressure sensors; non-invasive biomedical sensors; fiber-optics components and networks; distributed aerodynamic control; and on-demand structural strength. The long term goal of ARPA's MEMS program is to merge information processing with sensing and actuation to realize new systems and strategies for both perceiving and controlling systems, processes, and the environment. The MEMS program has three major thrusts: advanced devices and processes, system design, and infrastructure.

The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control

PubMed Central

Jenke, Christoph; Pallejà Rubio, Jaume; Kibler, Sebastian; Häfner, Johannes; Richter, Martin; Kutter, Christoph

2017-01-01

With the combination of micropumps and flow sensors, highly accurate and secure closed-loop controlled micro dosing systems for liquids are possible. Implementing a single stroke based control mode with piezoelectrically driven micro diaphragm pumps can provide a solution for dosing of volumes down to nanoliters or variable average flow rates in the range of nL/min to μL/min. However, sensor technologies feature a yet undetermined accuracy for measuring highly pulsatile micropump flow. Two miniaturizable in-line sensor types providing electrical readout—differential pressure based flow sensors and thermal calorimetric flow sensors—are evaluated for their suitability of combining them with mircopumps. Single stroke based calibration of the sensors was carried out with a new method, comparing displacement volumes and sensor flow volumes. Limitations of accuracy and performance for single stroke based flow control are described. Results showed that besides particle robustness of sensors, controlling resistive and capacitive damping are key aspects for setting up reproducible and reliable liquid dosing systems. Depending on the required average flow or defined volume, dosing systems with an accuracy of better than 5% for the differential pressure based sensor and better than 6.5% for the thermal calorimeter were achieved. PMID:28368344

Huyghens Engines--a new concept and its embodiment for nano-micro interlevel information processing.

PubMed

Santoli, Salvatore

2009-02-01

Current criteria in Bionanotechnology based on software and sensor/actuator hardware of Artificial Intelligence for bioinspired nanostructured systems lack the nanophysical background and key mathematics to describe and mimick the biological hierarchies of nano-to-micro-integrated informational/energetic levels. It is argued that bionanoscale hardware/software undividable solidarity can be mimicked by artificial nanostructured systems featuring intra/interlevel information processing through the emerging organization principle of quantum holography, described by the Heisenberg group G and by harmonic analysis on G. From a property of G as a Lie group, quantum holography is shown to merge the quantum/classical dynamic-symbolic ongoings into the structure-function unity of biological sensing-information processing-actuating, while by Ch. Huyghens' principles about wave motion and coupled oscillators synchronization it applies to environmental waves of any kind, so embodying a universal information processing engine, dubbed Huyghens Engine, that mimicks the holistic nanobiological structure-function solidarity and the kinetics/thermodynamics of nano/micro interface information transfer.

Study on digital closed-loop system of silicon resonant micro-sensor

NASA Astrophysics Data System (ADS)

Xu, Yefeng; He, Mengke

2008-10-01

Designing a micro, high reliability weak signal extracting system is a critical problem need to be solved in the application of silicon resonant micro-sensor. The closed-loop testing system based on FPGA uses software to replace hardware circuit which dramatically decrease the system's mass and power consumption and make the system more compact, both correlation theory and frequency scanning scheme are used in extracting weak signal, the adaptive frequency scanning arithmetic ensures the system real-time. The error model was analyzed to show the solution to enhance the system's measurement precision. The experiment results show that the closed-loop testing system based on FPGA has the personality of low power consumption, high precision, high-speed, real-time etc, and also the system is suitable for different kinds of Silicon Resonant Micro-sensor.

Microfabrication of IPMC cilia for bio-inspired flow sensing

NASA Astrophysics Data System (ADS)

Lei, Hong; Li, Wen; Tan, Xiaobo

2012-04-01

As the primary flow sensing organ for fishes, the lateral line system plays a critical role in fish behavior. Analogous to its biological counterpart, an artificial lateral line system, consisting of arrays of micro flow sensors, is expected to be instrumental in the navigation and control of underwater robots. In this paper we investigate the microfabrication of ionic polymer-metal composite (IPMC) cilia for the purpose of flow sensing. While existing macro- and microfabrication methods for IPMCs have predominantly focused on planar structures, we propose a device where micro IPMC beams stand upright on a substrate to effectively interact with the flow. Challenges in the casting of 3D Nafion structure and selective formation of electrodes are discussed, and potential solutions for addressing these challenges are presented together with preliminary microfabrication results.

FORMING SELF-ASSEMBLED CELL ARRAYS AND MEASURING THE OXYGEN CONSUMPTION RATE OF A SINGLE LIVE CELL.

PubMed

Etzkorn, James R; McQuaide, Sarah C; Anderson, Judy B; Meldrum, Deirdre R; Parviz, Babak A

2009-06-01

We report a method for forming arrays of live single cells on a chip using polymer micro-traps made of SU8. We have studied the toxicity of the microfabricated structures and the associated environment for two cell lines. We also report a method for measuring the oxygen consumption rate of a single cell using optical interrogation of molecular oxygen sensors placed in micromachined micro-wells by temporarily sealing the cells in the micro-traps. The new techniques presented here add to the collection of tools available for performing "single-cell" biology. A single-cell self-assembly yield of 61% was achieved with oxygen draw down rates of 0.83, 0.82, and 0.71 fmol/minute on three isolated live A549 cells.

FORMING SELF-ASSEMBLED CELL ARRAYS AND MEASURING THE OXYGEN CONSUMPTION RATE OF A SINGLE LIVE CELL

PubMed Central

Etzkorn, James R.; McQuaide, Sarah C.; Anderson, Judy B.; Meldrum, Deirdre R.; Parviz, Babak A.

2010-01-01

We report a method for forming arrays of live single cells on a chip using polymer micro-traps made of SU8. We have studied the toxicity of the microfabricated structures and the associated environment for two cell lines. We also report a method for measuring the oxygen consumption rate of a single cell using optical interrogation of molecular oxygen sensors placed in micromachined micro-wells by temporarily sealing the cells in the micro-traps. The new techniques presented here add to the collection of tools available for performing “single-cell” biology. A single-cell self-assembly yield of 61% was achieved with oxygen draw down rates of 0.83, 0.82, and 0.71 fmol/minute on three isolated live A549 cells. PMID:20694048

Effect of Knudsen thermal force on the performance of low-pressure micro gas sensor

NASA Astrophysics Data System (ADS)

Barzegar Gerdroodbary, M.; Ganji, D. D.; Taeibi-Rahni, M.; Vakilipour, Shidvash

2017-07-01

In this paper, Direct Simulation Monte Carlo (DSMC) simulations were applied to investigate the mechanism of the force generation inside a low-pressure gas sensor. The flow feature and force generation mechanism inside a rectangular enclosure with heat and cold arms as the non-isothermal walls are comprehensively explained. In addition, extensive parametric studies are done to study the effects of physical parameters on the performance and characteristics of this device in different operating conditions. In this research, the Knudsen number is varied from 0.1 to 4.5 (0.5 to 11torr) to reveal all the characteristics of the thermally driven force inside the MEMS sensor. In order to simulate a rarefied gas inside the micro gas detector, Boltzmann equations are applied to obtain high-precision results. The effects of ambient pressure and temperature difference of arms are comprehensively investigated. Our findings show that maximum force increases more than 7 times when the temperature difference of the cold and hot arms is increased from 10 to 100K. In addition, the results demonstrate that the thermal gradient at rarefied pressure induces complex structure, and the mechanism of force generation highly varies at different pressure conditions.

A Novel Multi-Aperture Based Sun Sensor Based on a Fast Multi-Point MEANSHIFT (FMMS) Algorithm

PubMed Central

You, Zheng; Sun, Jian; Xing, Fei; Zhang, Gao-Fei

2011-01-01

With the current increased widespread interest in the development and applications of micro/nanosatellites, it was found that we needed to design a small high accuracy satellite attitude determination system, because the star trackers widely used in large satellites are large and heavy, and therefore not suitable for installation on micro/nanosatellites. A Sun sensor + magnetometer is proven to be a better alternative, but the conventional sun sensor has low accuracy, and cannot meet the requirements of the attitude determination systems of micro/nanosatellites, so the development of a small high accuracy sun sensor with high reliability is very significant. This paper presents a multi-aperture based sun sensor, which is composed of a micro-electro-mechanical system (MEMS) mask with 36 apertures and an active pixels sensor (APS) CMOS placed below the mask at a certain distance. A novel fast multi-point MEANSHIFT (FMMS) algorithm is proposed to improve the accuracy and reliability, the two key performance features, of an APS sun sensor. When the sunlight illuminates the sensor, a sun spot array image is formed on the APS detector. Then the sun angles can be derived by analyzing the aperture image location on the detector via the FMMS algorithm. With this system, the centroid accuracy of the sun image can reach 0.01 pixels, without increasing the weight and power consumption, even when some missing apertures and bad pixels appear on the detector due to aging of the devices and operation in a harsh space environment, while the pointing accuracy of the single-aperture sun sensor using the conventional correlation algorithm is only 0.05 pixels. PMID:22163770

Non-contact respiration monitoring for in-vivo murine micro computed tomography: characterization and imaging applications

NASA Astrophysics Data System (ADS)

Burk, Laurel M.; Lee, Yueh Z.; Wait, J. Matthew; Lu, Jianping; Zhou, Otto Z.

2012-09-01

A cone beam micro-CT has previously been utilized along with a pressure-tracking respiration sensor to acquire prospectively gated images of both wild-type mice and various adult murine disease models. While the pressure applied to the abdomen of the subject by this sensor is small and is generally without physiological effect, certain disease models of interest, as well as very young animals, are prone to atelectasis with added pressure, or they generate too weak a respiration signal with this method to achieve optimal prospective gating. In this work we present a new fibre-optic displacement sensor which monitors respiratory motion of a subject without requiring physical contact. The sensor outputs an analogue signal which can be used for prospective respiration gating in micro-CT imaging. The device was characterized and compared against a pneumatic air chamber pressure sensor for the imaging of adult wild-type mice. The resulting images were found to be of similar quality with respect to physiological motion blur; the quality of the respiration signal trace obtained using the non-contact sensor was comparable to that of the pressure sensor and was superior for gating purposes due to its better signal-to-noise ratio. The non-contact sensor was then used to acquire in-vivo micro-CT images of a murine model for congenital diaphragmatic hernia and of 11-day-old mouse pups. In both cases, quality CT images were successfully acquired using this new respiration sensor. Despite the presence of beam hardening artefacts arising from the presence of a fibre-optic cable in the imaging field, we believe this new technique for respiration monitoring and gating presents an opportunity for in-vivo imaging of disease models which were previously considered too delicate for established animal handling methods.

Sensitivity Enhancement of FBG-Based Strain Sensor.

PubMed

Li, Ruiya; Chen, Yiyang; Tan, Yuegang; Zhou, Zude; Li, Tianliang; Mao, Jian

2018-05-17

A novel fiber Bragg grating (FBG)-based strain sensor with a high-sensitivity is presented in this paper. The proposed FBG-based strain sensor enhances sensitivity by pasting the FBG on a substrate with a lever structure. This typical mechanical configuration mechanically amplifies the strain of the FBG to enhance overall sensitivity. As this mechanical configuration has a high stiffness, the proposed sensor can achieve a high resonant frequency and a wide dynamic working range. The sensing principle is presented, and the corresponding theoretical model is derived and validated. Experimental results demonstrate that the developed FBG-based strain sensor achieves an enhanced strain sensitivity of 6.2 pm/με, which is consistent with the theoretical analysis result. The strain sensitivity of the developed sensor is 5.2 times of the strain sensitivity of a bare fiber Bragg grating strain sensor. The dynamic characteristics of this sensor are investigated through the finite element method (FEM) and experimental tests. The developed sensor exhibits an excellent strain-sensitivity-enhancing property in a wide frequency range. The proposed high-sensitivity FBG-based strain sensor can be used for small-amplitude micro-strain measurement in harsh industrial environments.

Sensitivity Enhancement of FBG-Based Strain Sensor

PubMed Central

Chen, Yiyang; Tan, Yuegang; Zhou, Zude; Mao, Jian

2018-01-01

A novel fiber Bragg grating (FBG)-based strain sensor with a high-sensitivity is presented in this paper. The proposed FBG-based strain sensor enhances sensitivity by pasting the FBG on a substrate with a lever structure. This typical mechanical configuration mechanically amplifies the strain of the FBG to enhance overall sensitivity. As this mechanical configuration has a high stiffness, the proposed sensor can achieve a high resonant frequency and a wide dynamic working range. The sensing principle is presented, and the corresponding theoretical model is derived and validated. Experimental results demonstrate that the developed FBG-based strain sensor achieves an enhanced strain sensitivity of 6.2 pm/με, which is consistent with the theoretical analysis result. The strain sensitivity of the developed sensor is 5.2 times of the strain sensitivity of a bare fiber Bragg grating strain sensor. The dynamic characteristics of this sensor are investigated through the finite element method (FEM) and experimental tests. The developed sensor exhibits an excellent strain-sensitivity-enhancing property in a wide frequency range. The proposed high-sensitivity FBG-based strain sensor can be used for small-amplitude micro-strain measurement in harsh industrial environments. PMID:29772826

Thermally Stable, Piezoelectric and Pyroelectric Polymeric Substrates and Method Relating Thereto

NASA Technical Reports Server (NTRS)

Simpson, Joycelyn O. (Inventor); St.Claire, Terry L. (Inventor)

2002-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared, This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers, acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors. in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches. adjustable fresnel lenses, speakers, tactile sensors, weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 100 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrates; heating the metal electrode coated polymeric substrate in a low dielectric medium; applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Thermally Stable, Piezoelectric and Pyroelectric Polymeric Substrates

NASA Technical Reports Server (NTRS)

Simpson, Joycely O. (Inventor); St.Clair, Terry L. (Inventor)

1999-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared. This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers. acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors, in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches, adjustable fresnel lenses, speakers, tactile sensors. weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 1000 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrate; heating the metal electrode coated polymeric substrate in a low dielectric medium; applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Method of Making Thermally Stable, Piezoelectric and Proelectric Polymeric Substrates

NASA Technical Reports Server (NTRS)

Simpson, Joycelyn O. (Inventor); St.Clair, Terry L. (Inventor)

1999-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared. This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers, acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors. in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches, adjustable fresnel lenses, speakers, tactile sensors, weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 100 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrate; heating the metal electrode coated polymeric substrate in a low dielectric medium: applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Using Micro-Molding and Stamping to Fabricate Conductive Polydimethylsiloxane-Based Flexible High-Sensitivity Strain Gauges.

PubMed

Han, Chi-Jui; Chiang, Hsuan-Ping; Cheng, Yun-Chien

2018-02-18

In this study, polydimethylsiloxane (PDMS) and conductive carbon nanoparticles were combined to fabricate a conductive elastomer PDMS (CPDMS). A high sensitive and flexible CPDMS strain sensor is fabricated by using stamping-process based micro patterning. Compared with conventional sensors, flexible strain sensors are more suitable for medical applications but are usually fabricated by photolithography, which suffers from a large number of steps and difficult mass production. Hence, we fabricated flexible strain sensors using a stamping-process with fewer processes than photolithography. The piezoresistive coefficient and sensitivity of the flexible strain sensor were improved by sensor pattern design and thickness change. Micro-patterning is used to fabricate various CPDMS microstructure patterns. The effect of gauge pattern was evaluated with ANSYS simulations. The piezoresistance of the strain gauges was measured and the gauge factor determined. Experimental results show that the piezoresistive coefficient of CPDMS is approximately linear. Gauge factor measurement results show that the gauge factor of a 140.0 μm thick strain gauge with five grids is the highest.

Self-assembly micro optical filter

NASA Astrophysics Data System (ADS)

Zhang, Ping (Cerina); Le, Kevin; Malalur-Nagaraja-Rao, Smitha; Hsu, Lun-Chen; Chiao, J.-C.

2006-01-01

Optical communication and sensor industry face critical challenges in manufacturing for system integration. Due to the assembly complexity and integration platform variety, micro optical components require costly alignment and assembly procedures, in which many required manual efforts. Consequently, self-assembly device architectures have become a great interest and could provide major advantages over the conventional optical devices. In this paper, we discussed a self-assembly integration platform for micro optical components. To demonstrate the adaptability and flexibility of the proposed optical device architectures, we chose a commercially available MEMS fabrication foundry service - MUMPs (Multi-User MEMS Process). In this work, polysilicon layers of MUMPS are used as the 3-D structural material for construction of micro component framework and actuators. However, because the polysilicon has high absorption in the visible and near infrared wavelength ranges, it is not suitable for optical interaction. To demonstrate the required optical performance, hybrid integration of materials was proposed and implemented. Organic compound materials were applied on the silicon-based framework to form the required optical interfaces. Organic compounds provide good optical transparency, flexibility to form filters or lens and inexpensive manufacturing procedures. In this paper, we have demonstrated a micro optical filter integrated with self-assembly structures. We will discuss the self-assembly mechanism, optical filter designs, fabrication issues and results.

Development of Micro Air Reconnaissance Vehicle as a Test Bed for Advanced Sensors and Electronics

NASA Technical Reports Server (NTRS)

Shams, Qamar A.; Vranas, Thomas L.; Fox, Robert L.; Kuhn, Theodore R.; Ingham, John; Logan, Michael J.; Barnes, Kevin N.; Guenther, Benjamin F.

2002-01-01

This paper describes the development of a Micro/Mini Air Reconnaissance Vehicle for advanced sensors and electronics at NASA Langley Research Center over the last year. This vehicle is expected to have a total weight of less than four pounds, a design velocity of 40 mph, an endurance of 15-20 minutes, and a maximum range of 5km. The vehicle has wings that are simple to detach yet retain the correct alignment. The upper fuselage surface has a quick release hatch used to access the interior and also to mount the varying propulsion systems. The sensor suite developed for this vehicle consists of a Pitot-static measurement system for determining air speed, an absolute pressure measurement for determining altitude, magnetic direction measurement, and three orthogonal gyros to determine body angular rates. Swarming GPS-guidance and in-flight maneuvering is discussed, as well as design and installation of some other advance sensors like MEMS microphones, infrared cameras, GPS, humidity sensors, and an ultrasonic sonar sensor. Also low cost, small size, high performance control and navigation system for the Micro Air Vehicle is discussed. At the end, laboratory characterization of different sensors, motors, propellers, and batteries will be discussed.

Evaluation of High-Precision Sensors in Structural Monitoring

PubMed Central

Erol, Bihter

2010-01-01

One of the most intricate branches of metrology involves the monitoring of displacements and deformations of natural and anthropogenic structures under environmental forces, such as tidal or tectonic phenomena, or ground water level changes. Technological progress has changed the measurement process, and steadily increasing accuracy requirements have led to the continued development of new measuring instruments. The adoption of an appropriate measurement strategy, with proper instruments suited for the characteristics of the observed structure and its environmental conditions, is of high priority in the planning of deformation monitoring processes. This paper describes the use of precise digital inclination sensors in continuous monitoring of structural deformations. The topic is treated from two viewpoints: (i) evaluation of the performance of inclination sensors by comparing them to static and continuous GPS observations in deformation monitoring and (ii) providing a strategy for analyzing the structural deformations. The movements of two case study objects, a tall building and a geodetic monument in Istanbul, were separately monitored using dual-axes micro-radian precision inclination sensors (inclinometers) and GPS. The time series of continuous deformation observations were analyzed using the Least Squares Spectral Analysis Technique (LSSA). Overall, the inclinometers showed good performance for continuous monitoring of structural displacements, even at the sub-millimeter level. Static GPS observations remained insufficient for resolving the deformations to the sub-centimeter level due to the errors that affect GPS signals. With the accuracy advantage of inclination sensors, their use with GPS provides more detailed investigation of deformation phenomena. Using inclinometers and GPS is helpful to be able to identify the components of structural responses to the natural forces as static, quasi-static, or resonant. PMID:22163499

Direct measurement for organic solvents diffusion using ultra-sensitive optical resonator

NASA Astrophysics Data System (ADS)

Ali, Amir R.; Elias, Catherine M.

2017-06-01

In this paper, novel techniques using ultra-sensitive chemical optical sensor based on whispering gallery modes (WGM) are proposed through two different configurations. The first one will use a composite micro-sphere, when the solvent interacts with the polymeric optical sensors through diffusion the sphere start to swallow that solvent. In turn, that leads to change the morphology and mechanical properties of the polymeric spheres. Also, these changes could be measured by tracking the WGM shifts. Several experiments were carried out to study the solvent induced WGM shift using microsphere immersed in a solvent atmosphere. It can be potentially used for sensing the trace organic solvents like ethanol and methanol. The second configuration will use a composite beam nitrocellulose composite (NC) structure that acts as a sensing element. In this configuration, a beam is anchored to a substrate in one end, and the other end is compressing the polymeric sphere causing a shift in its WGM. When a chemical molecule is attached to the beam, the resonant frequency of the cantilever will be changed for a certain amount. By sensing this certain resonant frequency change, the existence of a single chemical molecule can be detected. A preliminary experimental model is developed to describe the vibration of the beam structure. The resonant frequency change of the cantilever due to attached mass is examined imperially using acetone as an example. Breath diagnosis can use this configuration in diabetic's diagnosis. Since, solvent like acetone concentration in human breath leads to a quick, convenient, accurate and painless breath diagnosis of diabetics. These micro-optical sensors have been examined using preliminary experiments to fully investigate its response. The proposed chemical sensor can achieve extremely high sensitivity in molecular level.

Micro-Ares, An electric field sensor for ExoMars 2016

NASA Astrophysics Data System (ADS)

Déprez, G.; Montmessin, F.; Witasse, O.; Lapauw, L.; Vivat, F.; Abbaki, S.; Granier, P.; Moirin, D.; Trautner, R.; Hassen-Khodja, R.; d'Almeida, E.; Chardenal, L.; Berthelier, J.-J.; Espositi, F.; Debei, S.; Rafkin, S.; Barth, E.

2015-10-01

For the past few years, LATMOS has been involved in the development of Micro-ARES, an electric field sensor part of the science payload (DREAMS) of the ExoMars 2016 Schiaparelli entry, descent and landing demonstratormodule (EDM). It is dedicated to the very first measurement and characterization of the Martian atmospheric electricity.

Efficient low-power wireless communication setup for an autonomous soil moisture sensor

NASA Astrophysics Data System (ADS)

Surducan, Vasile; Surducan, Emanoil

2017-12-01

During July 2016 - September 2017, a micro-irrigation system was set up and tested in field and greenhouse-like conditions, using eight inexpensive soil moisture sensors designed and manufactured in our institute. Each sensor was powered by accumulators charged by an (8 × 14) cm2 solar panel. The energy budget was carefully managed to allow long operating time for both the moisture sensor and the irrigation automation. We present here the hardware-software setup implemented in our proprietary moisture sensor for wireless communication, using Bluetooth Low Energy modules (BLE). The autonomy of the system may reach 4-5 cloudy days without the need of recharging the accumulators from the sun. Over the entire operating period, the moisture sensors send data wirelessly every sampling time (15 to 30 minutes) following water drips on the soil for the next 30 seconds, pushed by a low power micro pump. The micro-irrigation process is repeated every sampling time, until the soil moisture threshold is reached. In between the operating states, the sensor and watering automation go to sleep. The software algorithm ensures low energy (max. 2.8 mWh) consumption for the moisture sensor and 20 mWh for the irrigation automation, substantially increasing the accumulators discharge cycle.

Flexible strain sensor based on carbon nanotube rubber composites

NASA Astrophysics Data System (ADS)

Kim, Jin-Ho; Kim, Young-Ju; Baek, Woon Kyung; Lim, Kwon Taek; Kang, Inpil

2010-04-01

Electrically conducting rubber composites (CRC) with carbon nanotubes (CNTs) filler have received much attention as potential materials for sensors. In this work, Ethylene propylene diene M-class rubber (EPDM)/CNT composites as a novel nano sensory material were prepared to develop flexible strain sensors that can measure large deformation of flexible structures. The EPDM/CNT composites were prepared by using a Brabender mixer with multi-walled CNTs and organo-clay. A strain sensor made of EPDM/CNT composite was attached to the surface of a flexible beam and change of resistance of the strain sensor was measured with respect to the beam deflection. Resistance of the sensor was change quite linearly under the bending and compressive large beam deflection. Upon external forces, CRC deformation takes place with the micro scale change of inter-electrical condition in rubber matrix due to the change of contact resistance, and CRC reveals macro scale piezoresistivity. It is anticipated that the CNT/EPDM fibrous strain sensor can be eligible to develop a biomimetic artificial neuron that can continuously sense deformation, pressure and shear force.

Characteristics research of pressure sensor based on nanopolysilicon thin films resistors

NASA Astrophysics Data System (ADS)

Zhao, Xiaofeng; Li, Dandan; Wen, Dianzhong

2017-10-01

To further improve the sensitivity temperature characteristics of pressure sensor, a kind of pressure sensor taking nanopolysilicon thin films as piezoresistors is proposed in this paper. On the basis of the microstructure analysis by X-ray diffraction (XRD) and scanning electron microscope (SEM) tests, the preparing process of nanopolysilicon thin films is optimized. The effects of film thickness and annealing temperature on the micro-structure of nanopolysilicon thin films were studied, respectively. In order to realize the measurement of external pressure, four nanopolysilicon thin films resistors were arranged at the edges of square silicon diaphragm connected to a Wheatstone bridge, and the chip of the sensor was designed and fabricated on a 〈100〉 orientation silicon wafer by microelectromechanical system (MEMS) technology. Experimental result shows that when I = 6.80 mA, the sensitivity of the sensor PS-1 is 0.308 mV/kPa, and the temperature coefficient of sensitivity (TCS) is about -1742 ppm/∘C in the range of -40-140∘C. It is possible to obviously improve the sensitivity temperature characteristics of pressure sensor by the proposed sensors.

Structural health monitoring system for bridges based on skin-like sensor

NASA Astrophysics Data System (ADS)

Loupos, Konstantinos; Damigos, Yannis; Amditis, Angelos; Gerhard, Reimund; Rychkov, Dmitry; Wirges, Werner; Schulze, Manuel; Lenas, Sotiris-Angelos; Chatziandreoglou, Christos; Malliou, Christina M.; Tsaoussidis, Vassilis; Brady, Ken; Frankenstein, Bernd

2017-09-01

Structural health monitoring activities are of primal importance for managing transport infrastructure, however most SHM methodologies are based on point-based sensors that have limitations in terms of their spatial positioning requirements, cost of development and measurement range. This paper describes the progress on the SENSKIN EC project whose objective is to develop a dielectric-elastomer and micro-electronics-based sensor, formed from a large highly extensible capacitance sensing membrane supported by advanced microelectronic circuitry, for monitoring transport infrastructure bridges. Such a sensor could provide spatial measurements of strain in excess of 10%. The actual sensor along with the data acquisition module, the communication module and power electronics are all integrated into a compact unit, the SENSKIN device, which is energy-efficient, requires simple signal processing and it is easy to install over various surface types. In terms of communication, SENSKIN devices interact with each other to form the SENSKIN system; a fully distributed and autonomous wireless sensor network that is able to self-monitor. SENSKIN system utilizes Delay-/Disruption-Tolerant Networking technologies to ensure that the strain measurements will be received by the base station even under extreme conditions where normal communications are disrupted. This paper describes the architecture of the SENSKIN system and the development and testing of the first SENSKIN prototype sensor, the data acquisition system, and the communication system.

Development of topologically structured membranes of aluminum oxide

NASA Astrophysics Data System (ADS)

Bankova, A.; Videkov, V.; Tzaneva, B.

2014-05-01

In recent years, nanomembranes have become one of the most widely used construction material for ultrasensitive and ultrathin applications in micro-electromechanical systems (MEMS) and other sensor structures due to their remarkable mechanical properties. Among these, the mechanical stability is of particular importance. We present an approach to the analysis of the stability of nanostructured anodic aluminum oxide free membranes subjected to mechanical bending. The membranes tested were with a thickness of 500 nm to 15 urn in various topological shapes; we describe the technological schemes of their preparation. Bends were applied to membranes prepared by using a selective process of etching and anodizing. The results of the preparation of the membranes are discussed, together with the influence of the angle of deflection, and the number of bendings. The results obtained can be used in designing MEMS structures and sensors which use nanostructured anodic aluminum oxide.

Aircraft Aerodynamic Parameter Detection Using Micro Hot-Film Flow Sensor Array and BP Neural Network Identification

PubMed Central

Que, Ruiyi; Zhu, Rong

2012-01-01

Air speed, angle of sideslip and angle of attack are fundamental aerodynamic parameters for controlling most aircraft. For small aircraft for which conventional detecting devices are too bulky and heavy to be utilized, a novel and practical methodology by which the aerodynamic parameters are inferred using a micro hot-film flow sensor array mounted on the surface of the wing is proposed. A back-propagation neural network is used to model the coupling relationship between readings of the sensor array and aerodynamic parameters. Two different sensor arrangements are tested in wind tunnel experiments and dependence of the system performance on the sensor arrangement is analyzed. PMID:23112638

Aircraft aerodynamic parameter detection using micro hot-film flow sensor array and BP neural network identification.

PubMed

Que, Ruiyi; Zhu, Rong

2012-01-01

Air speed, angle of sideslip and angle of attack are fundamental aerodynamic parameters for controlling most aircraft. For small aircraft for which conventional detecting devices are too bulky and heavy to be utilized, a novel and practical methodology by which the aerodynamic parameters are inferred using a micro hot-film flow sensor array mounted on the surface of the wing is proposed. A back-propagation neural network is used to model the coupling relationship between readings of the sensor array and aerodynamic parameters. Two different sensor arrangements are tested in wind tunnel experiments and dependence of the system performance on the sensor arrangement is analyzed.

Developments and Applications of Electrogenerated Chemiluminescence Sensors Based on Micro- and Nanomaterials

PubMed Central

Hazelton, Sandra G.; Zheng, Xingwang; Zhao, Julia Xiaojun; Pierce, David T.

2008-01-01

A variety of recent developments and applications of electrogenerated chemiluminescence (ECL) for sensors are described. While tris(2,2′-bipyridyl)-ruthenium(II) and luminol have dominated and continue to pervade the field of ECL-based sensors, recent work has focused on use of these lumophores with micro- and nanomaterials. It has also extended to inherently luminescent nanomaterials, such as quantum dots. Sensor configurations including microelectrode arrays and microfluidics are reviewed and, with the recent trend toward increased use of nanomaterials, special attention has been given to sensors which include thin films, nanoparticles and nanotubes. Applications of ECL labels and examples of label-free sensing that incorporate nanomaterials are also discussed. PMID:27873850

Design Concepts, Fabrication and Advanced Characterization Methods of Innovative Piezoelectric Sensors Based on ZnO Nanowires.

PubMed

Araneo, Rodolfo; Rinaldi, Antonio; Notargiacomo, Andrea; Bini, Fabiano; Pea, Marialilia; Celozzi, Salvatore; Marinozzi, Franco; Lovat, Giampiero

2014-12-08

Micro- and nano-scale materials and systems based on zinc oxide are expected to explode in their applications in the electronics and photonics, including nano-arrays of addressable optoelectronic devices and sensors, due to their outstanding properties, including semiconductivity and the presence of a direct bandgap, piezoelectricity, pyroelectricity and biocompatibility. Most applications are based on the cooperative and average response of a large number of ZnO micro/nanostructures. However, in order to assess the quality of the materials and their performance, it is fundamental to characterize and then accurately model the specific electrical and piezoelectric properties of single ZnO structures. In this paper, we report on focused ion beam machined high aspect ratio nanowires and their mechanical and electrical (by means of conductive atomic force microscopy) characterization. Then, we investigate the suitability of new power-law design concepts to accurately model the relevant electrical and mechanical size-effects, whose existence has been emphasized in recent reviews.

Design Concepts, Fabrication and Advanced Characterization Methods of Innovative Piezoelectric Sensors Based on ZnO Nanowires

PubMed Central

Araneo, Rodolfo; Rinaldi, Antonio; Notargiacomo, Andrea; Bini, Fabiano; Pea, Marialilia; Celozzi, Salvatore; Marinozzi, Franco; Lovat, Giampiero

2014-01-01

Micro- and nano-scale materials and systems based on zinc oxide are expected to explode in their applications in the electronics and photonics, including nano-arrays of addressable optoelectronic devices and sensors, due to their outstanding properties, including semiconductivity and the presence of a direct bandgap, piezoelectricity, pyroelectricity and biocompatibility. Most applications are based on the cooperative and average response of a large number of ZnO micro/nanostructures. However, in order to assess the quality of the materials and their performance, it is fundamental to characterize and then accurately model the specific electrical and piezoelectric properties of single ZnO structures. In this paper, we report on focused ion beam machined high aspect ratio nanowires and their mechanical and electrical (by means of conductive atomic force microscopy) characterization. Then, we investigate the suitability of new power-law design concepts to accurately model the relevant electrical and mechanical size-effects, whose existence has been emphasized in recent reviews. PMID:25494351

Development of self-powered strain sensor using mechano-luminescent ZnS:Cu and mechano-optoelectronic P3HT

NASA Astrophysics Data System (ADS)

Pulliam, Elias; Hoover, George; Tiparti, Dhruv; Ryu, Donghyeon

2017-04-01

Aerospace structural systems are prone to structural damage during their use by vibration, impact, material degradation, and other factors. Due to the harsh environments in which aerospace structures operate, aerospace structures are susceptible to various types of damage and often their structural integrity is jeopardized unless damage onset is detected in timely manner. Yet, current state-of-the-art sensor technologies are still limited for structural health monitoring (SHM) of aerospace structures due to their high power consumption, need for large form factor design, and manageable integration into aerospace structures. This study proposes a design of multilayered self-powered strain sensor by coupling mechano-luminescent (ML) property of copper-doped zinc sulfide (ZnS:Cu) and mechano-optoelectronic (MO) property of poly(3-hexylthiophene) (P3HT). One functional layer of the self-powered strain sensor is ZnS:Cu-based elastomeric composites that emit light in response to mechanical deformation. Another functional layer is P3HT-based thin films that generate direct current (DC) under light illumination and DC magnitude changes with applied strain. First, ML light emission characteristics of ZnS:Cu-based composites are studied under cyclic tensile strain with two various maximum strain up to 10% and 15% at various loading frequencies from 5 Hz to 20 Hz. Second, piezo-optical properties of P3HT-based thin films are investigated by acquiring light absorption of the thin films at various strains from 0% to 2% tensile strain. Last, micro-mechanical properties of the P3HT-based thin films are characterized using nanoindentation.

Optical Fiber-Tip Sensors Based on In-Situ µ-Printed Polymer Suspended-Microbeams.

PubMed

Yao, Mian; Ouyang, Xia; Wu, Jushuai; Zhang, A Ping; Tam, Hwa-Yaw; Wai, P K A

2018-06-05

Miniature optical fiber-tip sensors based on directly µ-printed polymer suspended-microbeams are presented. With an in-house optical 3D μ-printing technology, SU-8 suspended-microbeams are fabricated in situ to form Fabry⁻Pérot (FP) micro-interferometers on the end face of standard single-mode optical fiber. Optical reflection spectra of the fabricated FP micro-interferometers are measured and fast Fourier transform is applied to analyze the cavity of micro-interferometers. The applications of the optical fiber-tip sensors for refractive index (RI) sensing and pressure sensing, which showed 917.3 nm/RIU to RI change and 4.29 nm/MPa to pressure change, respectively, are demonstrated in the experiments. The sensors and their optical µ-printing method unveil a new strategy to integrate complicated microcomponents on optical fibers toward 'lab-on-fiber' devices and applications.

Numerical Study on the Particle Trajectory Tracking in a Micro-UV Bio-Fluorescence Sensor.

PubMed

Byeon, Sun-Seok; Cho, Moon-Young; Lee, Jong-Chul; Kim, Youn-Jea

2015-03-01

A micro-UV bio-fluorescence sensor was developed to detect primary biological aerosols including bacteria, bacterial spores, fungal spores, pollens, viruses, algae, etc. In order to effectively detect the bio-particles in a micro-UV bio-fluorescence sensor, numerical calculations were performed to adjust for appropriate flow conditions of the sensor by regulating the sample aerosols and sheath flow. In particular, a CFD-based model of hydrodynamic processes was developed by computing the trajectory of particles using commercially available ANSYS CFX-14 software and the Lagrangian tracking model. The established model was evaluated with regard to the variation of sheath flow rate and particle size. Results showed that the sheath flow was changed rapidly at the end of nozzle tip, but the sample particles moved near the center of aerosol jet for aerodynamic focusing with little deviation from the axis.

Mixed-mode VLSI optic flow sensors for in-flight control of a micro air vehicle

NASA Astrophysics Data System (ADS)

Barrows, Geoffrey L.; Neely, C.

2000-11-01

NRL is developing compact optic flow sensors for use in a variety of small-scale navigation and collision avoidance tasks. These sensors are being developed for use in micro air vehicles (MAVs), which are autonomous aircraft whose maximum dimension is on the order of 15 cm. To achieve desired weight specifications of 1 - 2 grams, mixed-signal VLSI circuitry is being used to develop compact focal plane sensors that directly compute optic flow. As an interim proof of principle, we have constructed a sensor comprising a focal plane sensor head with on-chip processing and a back-end PIC microcontroller. This interim sensors weighs approximately 25 grams and is able to measure optic flow with real-world and low-contrast textures. Variations of this sensor have been used to control the flight of a glider in real-time to avoid collisions with walls.

BDM-KAT; Report of Research Results

DTIC Science & Technology

1990-03-31

relations, constraints TASK PRC>CESS MODEL TASK MICRO FOR SENSOR DATA Figure 4. Computer Network for the Intelligent Control of the HIP Process...prototyped and used in preliminary knowledge acquisition for an intelligent process controller for Hot Isostatic Pressing (HIP). Both the volume of...information collected and structured and Lhe value of that knowledge for the developing controller attest to the value of the concepts implemented in BDM

Fabrication and Testing of a Modular Micro-Pocket Fission Detector Instrumentation System for Test Nuclear Reactors

NASA Astrophysics Data System (ADS)

Reichenberger, Michael A.; Nichols, Daniel M.; Stevenson, Sarah R.; Swope, Tanner M.; Hilger, Caden W.; Roberts, Jeremy A.; Unruh, Troy C.; McGregor, Douglas S.

2018-01-01

Advancements in nuclear reactor core modeling and computational capability have encouraged further development of in-core neutron sensors. Measurement of the neutron-flux distribution within the reactor core provides a more complete understanding of the operating conditions in the reactor than typical ex-core sensors. Micro-Pocket Fission Detectors have been developed and tested previously but have been limited to single-node operation and have utilized highly specialized designs. The development of a widely deployable, multi-node Micro-Pocket Fission Detector assembly will enhance nuclear research capabilities. A modular, four-node Micro-Pocket Fission Detector array was designed, fabricated, and tested at Kansas State University. The array was constructed from materials that do not significantly perturb the neutron flux in the reactor core. All four sensor nodes were equally spaced axially in the array to span the fuel-region of the reactor core. The array was filled with neon gas, serving as an ionization medium in the small cavities of the Micro-Pocket Fission Detectors. The modular design of the instrument facilitates the testing and deployment of numerous sensor arrays. The unified design drastically improved device ruggedness and simplified construction from previous designs. Five 8-mm penetrations in the upper grid plate of the Kansas State University TRIGA Mk. II research nuclear reactor were utilized to deploy the array between fuel elements in the core. The Micro-Pocket Fission Detector array was coupled to an electronic support system which has been specially developed to support pulse-mode operation. The Micro-Pocket Fission Detector array composed of four sensors was used to monitor local neutron flux at a constant reactor power of 100 kWth at different axial locations simultaneously. The array was positioned at five different radial locations within the core to emulate the deployment of multiple arrays and develop a 2-dimensional measurement of neutron flux in the reactor core.

A review of micromachined thermal accelerometers

NASA Astrophysics Data System (ADS)

Mukherjee, Rahul; Basu, Joydeep; Mandal, Pradip; Guha, Prasanta Kumar

2017-12-01

A thermal convection based micro-electromechanical accelerometer is a relatively new kind of acceleration sensor that does not require a solid proof mass, yielding unique benefits like high shock survival rating, low production cost, and integrability with CMOS integrated circuit technology. This article provides a comprehensive survey of the research, development, and current trends in the field of thermal acceleration sensors, with detailed enumeration on the theory, operation, modeling, and numerical simulation of such devices. Different reported varieties and structures of thermal accelerometers have been reviewed highlighting key design, implementation, and performance aspects. Materials and technologies used for fabrication of such sensors have also been discussed. Further, the advantages and challenges for thermal accelerometers vis-à-vis other prominent accelerometer types have been presented, followed by an overview of associated signal conditioning circuitry and potential applications.

Fast Uncooled Low Density FPA of VPD PbSe for Applications in Hyperspectral Imagery

DTIC Science & Technology

2009-10-01

Marañosa (ITM-CIDA). Area de Optronica y Acustica Unidad de Sensores y Micro-Nano Tecnologia Arturo Soria, 289 E-28033 Madrid, Spain ABSTRACT...ADDRESS(ES) Instituto Tecnologico de la Marañosa (ITM-CIDA). Area de Optronica y Acustica Unidad de Sensores y Micro-Nano Tecnologia Arturo Soria, 289

Embedded micro-sensor for monitoring pH in concrete structures

NASA Astrophysics Data System (ADS)

Srinivasan, Rengaswamy; Phillips, Terry E.; Bargeron, C. Brent; Carlson, Micah A.; Schemm, Elizabeth R.; Saffarian, Hassan M.

2000-04-01

Three major causes of corrosion of steel in concrete are chloride ions (Cl-), temperature (T) and acidity (pH). Under normal operating temperatures and with pH above 13, steel does not undergo pitting corrosion. In presence of Cl-, if the pH decreases below 12, the probability of pitting increases. Acid rain and atmospheric carbon dioxide cause the pH to drop in concrete, often leading to corrosion of the structure with the concomitant cost of repair or replacement. Currently, the pH level in concrete is estimated through destructive testing of the structures. Glass ISFET, and other pH sensors that need maintenance and calibration cannot be embedded in concrete. In this paper, we describe an inexpensive solid state pH sensor that can be embedded in concrete, to detect pH changes at the early stages. It employs a chemical reagent, trinitrobenzenesulfonic acid (TNBS) that exhibits changes in optical properties in the 12 - 14 pH range, and is held in a film of a sol-gel/TNBS composite on an optically transparent surface. A simple LED/filter/photodiode transducer monitors pH-induced changes in TNBS. Such a device needs no periodic calibration or maintenance. The optical window, the light-source and sensor can be easily housed and encapsulated in a chemically inert structure, and embedded in concrete.

Assurance Technology Challenges of Advanced Space Systems

NASA Technical Reports Server (NTRS)

Chern, E. James

2004-01-01

The initiative to explore space and extend a human presence across our solar system to revisit the moon and Mars post enormous technological challenges to the nation's space agency and aerospace industry. Key areas of technology development needs to enable the endeavor include advanced materials, structures and mechanisms; micro/nano sensors and detectors; power generation, storage and management; advanced thermal and cryogenic control; guidance, navigation and control; command and data handling; advanced propulsion; advanced communication; on-board processing; advanced information technology systems; modular and reconfigurable systems; precision formation flying; solar sails; distributed observing systems; space robotics; and etc. Quality assurance concerns such as functional performance, structural integrity, radiation tolerance, health monitoring, diagnosis, maintenance, calibration, and initialization can affect the performance of systems and subsystems. It is thus imperative to employ innovative nondestructive evaluation methodologies to ensure quality and integrity of advanced space systems. Advancements in integrated multi-functional sensor systems, autonomous inspection approaches, distributed embedded sensors, roaming inspectors, and shape adaptive sensors are sought. Concepts in computational models for signal processing and data interpretation to establish quantitative characterization and event determination are also of interest. Prospective evaluation technologies include ultrasonics, laser ultrasonics, optics and fiber optics, shearography, video optics and metrology, thermography, electromagnetics, acoustic emission, x-ray, data management, biomimetics, and nano-scale sensing approaches for structural health monitoring.

Advanced Nanoporous Materials for Micro-Gravimetric Sensing to Trace-Level Bio/Chemical Molecules

PubMed Central

Xu, Pengcheng; Li, Xinxin; Yu, Haitao; Xu, Tiegang

2014-01-01

Functionalized nanoporous materials have been developed recently as bio/chemical sensing materials. Due to the huge specific surface of the nano-materials for molecular adsorption, high hopes have been placed on gravimetric detection with micro/nano resonant cantilevers for ultra-sensitive sensing of low-concentration bio/chemical substances. In order to enhance selectivity of the gravimetric resonant sensors to the target molecules, it is crucial to modify specific groups onto the pore-surface of the nano-materials. By loading the nanoporous sensing material onto the desired region of the mass-type transducers like resonant cantilevers, the micro-gravimetric bio/chemical sensors can be formed. Recently, such micro-gravimetric bio/chemical sensors have been successfully applied for rapid or on-the-spot detection of various bio/chemical molecules at the trace-concentration level. The applicable nanoporous sensing materials include mesoporous silica, zeolite, nanoporous graphene oxide (GO) and so on. This review article focuses on the recent achievements in design, preparation, functionalization and characterization of advanced nanoporous sensing materials for micro-gravimetric bio/chemical sensing. PMID:25313499

Microfluidic biosensing systems. Part I. Development and optimisation of enzymatic chemiluminescent micro-biosensors based on silicon microchips.

PubMed

Davidsson, Richard; Genin, Frédéric; Bengtsson, Martin; Laurell, Thomas; Emnéus, Jenny

2004-10-01

Chemiluminescent (CL) enzyme-based flow-through microchip biosensors (micro-biosensors) for detection of glucose and ethanol were developed for the purpose of monitoring real-time production and release of glucose and ethanol from microchip immobilised yeast cells. Part I of this study focuses on the development and optimisation of the micro-biosensors in a microfluidic sequential injection analysis (microSIA) system. Glucose oxidase (GOX) or alcohol oxidase (AOX) was co-immobilised with horseradish peroxidase (HRP) on porous silicon flow through microchips. The hydrogen peroxide produced from oxidation of the corresponding analyte (glucose or ethanol) took part in the chemiluminescent (CL) oxidation of luminol catalysed by HRP enhanced by addition of p-iodophenol (PIP). All steps in the microSIA system, including control of syringe pump, multiposition valve (MPV) and data readout, were computer controlled. The influence of flow rate and luminol- and PIP concentration were investigated using a 2(3)-factor experiment using the GOX-HRP sensor. It was found that all estimated single factors and the highest order of interaction were significant. The optimum was found at 250 microM luminol and 150 microM PIP at a flow rate of 18 microl min(-1), the latter as a compromise between signal intensity and analysis time. Using the optimised system settings one sample was processed within 5 min. Two different immobilisation chemistries were investigated for both micro-biosensors based on 3-aminopropyltriethoxsilane (APTS)- or polyethylenimine (PEI) functionalisation followed by glutaraldehyde (GA) activation. GOX-HRP micro-biosensors responded linear in a log-log format within the range 10-1000 microM glucose. Both had an operational stability of at least 8 days, but the PEI-GOX-HRP sensor was more sensitive. The AOX-HRP micro-biosensors responded linear (log-log) in the range between 1 and 10 mM ethanol, but the PEI-AOX-HRP sensor was in general more sensitive. Both sensors had an operational stability of at least 8 h, but with a half-life of 2-3 days.

Hydrothermally grown α-MnO2 interlocked mesoporous micro-cubes of several nanocrystals as selective and sensitive nitrogen dioxide chemoresistive gas sensors

NASA Astrophysics Data System (ADS)

Shinde, Pritamkumar V.; Xia, Qi Xun; Ghule, Balaji G.; Shinde, Nanasaheb M.; Seonghee, Jeong; Kim, Kwang Ho; Mane, Rajaram S.

2018-06-01

The interesting and multifunctional properties of alpha-manganese dioxide (α-MnO2) are considered to be highly sensitive and selective to nitrogen dioxide (NO2) chemresistive gas sensors. The α-MnO2 mesoporous interlocked micro-cubes composed of several interconnected nanocrystals synthesized by a facile and low-cost hydrothermal method on soda-lime glass substrate are envisaged as selective and sensitive NO2 gas sensors. Phase-purity and surface area with pore-size distribution are initially screened. The three-dimensional α-MnO2 mesoporous-cube-based gas sensors tested for NO2 gas from room-temperature (27 °C) to 250 °C have demonstrated 33% response for 100 ppm NO2 levels at 150 °C. The response and recovery time values of the α-MnO2 sensor are found to be 26 s and recovery 91 s, respectively, with high selectivity, good sensitivity, and considerable chemical and environmental stabilities, confirming the gas sensor applications potentiality of α-MnO2 morphology which is a combination of interlocked mesoporous micro-cubes and well-connected nanocrystals.

Hopfield neural network and optical fiber sensor as intelligent heart rate monitor

NASA Astrophysics Data System (ADS)

Mutter, Kussay Nugamesh

2018-01-01

This paper presents a design and fabrication of an intelligent fiber-optic sensor used for examining and monitoring heart rate activity. It is found in the literature that the use of fiber sensors as heart rate sensor is widely studied. However, the use of smart sensors based on Hopfield neural networks is very low. In this work, the sensor is a three fibers without cladding of about 1 cm, fed by laser light of 1550 nm of wavelength. The sensing portions are mounted with a micro sensitive diaphragm to transfer the pulse pressure on the left radial wrist. The influenced light intensity will be detected by a three photodetectors as inputs into the Hopfield neural network algorithm. The latter is a singlelayer auto-associative memory structure with a same input and output layers. The prior training weights are stored in the net memory for the standard recorded normal heart rate signals. The sensors' heads work on the reflection intensity basis. The novelty here is that the sensor uses a pulse pressure and Hopfield neural network in an integrity approach. The results showed a significant output measurements of heart rate and counting with a plausible error rate.

Miniature fiber Fabry-Perot sensors based on fusion splicing

NASA Astrophysics Data System (ADS)

Zhu, Jia-li; Wang, Ming; Yang, Chun-di; Wang, Ting-ting

2013-03-01

Fiber-optic Fabry-Perot (F-P) sensors are widely investigated because they have several advantages over conventional sensors, such as immunity to electromagnetic interference, ability to operate under bad environments, high sensitivity and the potential for multiplexing. A new method to fabricate micro-cavity Fabry-Perot interferometer is introduced, which is fusion splicing a section of conventional single-mode fiber (SMF) and a section of hollow core or solid core photonic crystal fiber (PCF) together to form a micro-cavity at the splice joint. The technology of fusion splicing is discussed, and two miniature optical fiber sensors based on Fabry-Perot interference using fusion splicing are presented. The two sensors are completely made of fused silica, and have good high-temperature capability.

Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

PubMed Central

Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang

2009-01-01

The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0–300 kPa. PMID:22303167

Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip.

PubMed

Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang

2009-01-01

The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0-300 kPa.

A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

PubMed Central

Huang, Che-Wei; Huang, Yu-Jie; Lu, Shey-Shi; Lin, Chih-Ting

2012-01-01

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.

The Sense-City equipment project: insight into the prototyping and validation of environmental micro- and nanosensors for a sustainable urbanization

NASA Astrophysics Data System (ADS)

Lebental, Bérengère; Angelescu, Dan; Bourouina, Tarik; Bourquin, Frédéric; Cojocaru, Costel-Sorin; Derkx, François; Dumoulin, Jean; Ha, Thi-Lan; Robine, Enric; Van Damme, Henri

2013-04-01

While today's galloping urbanization weighs heavily on both People and Environment, the massive instrumentation of urban spaces appears a landmark toward sustainability. Collecting massively distributed information requires the use of high-performance communication systems as well as sensors with very small ecological footprint. Because of their high sensitivity, the wide range of their observables, their energetic self-sufficiency and their low cost, micro- and nano- sensors are particularly well suited to urban metrology. A 8 years, 9 M€ equipment project funded by the French "Programme d'Investissement d'Avenir" starting in 2012, the Sense-City project will offer a suite of high-quality facilities for the design, prototyping and performance assessment of micro- and nanosensors devoted to sustainable urbanization. The scientific program of Sense-City is built around four programs, environmental monitoring, structural health monitoring, energy performances monitoring and people health and exposure monitoring. We present the activities of the consortium partners, IFSTTAR, ESIEE-Paris, CSTB, LPICM, and the prospects brought by Sense-City equipment in terms of sensor prototyping, benchmarking and operation validation. We discuss how the various sensors developed by LPICM and ESIEE (for instance conformable chemical and gas microsensors using nanomaterials at LPICM, miniaturized gas chromatographs or microfluidic lab-on-chip for particles analysis at ESIEE-Paris) can be integrated by IFSTTAR into sensors networks tested by IFSTTAR and CSTB in both lab and urban settings. The massively distributed data are interpreted using advanced physical models and inverse methods in order to monitor water, air or soil quality, infrastructure and network safety, building energy performances as well as people health and exposure. We discuss the shortcomings of evaluating the performances of sensors only in lab conditions or directly in real, urban conditions. As a solution, Sense-City will provide an environment of intermediate complexity for the testing of environmental sensors, a realistic urban test space in climatic conditions, both far more complex than clean rooms and far more controllable than actual cities. References: [1] Joblin Y et al., International Biodeterioration & Biodegradation 2010, 64, 210-217 [2] Lee C S et al., Nanotechnology 2012, accepted [3] Nachef K et al., IEEE/ASME Journal of Microelectromechanical Systems 2102, 21

Micro-electromechanical sensors in the analytical field.

PubMed

Zougagh, Mohammed; Ríos, Angel

2009-07-01

Micro- and nano-electromechanical systems (MEMS and NEMS) for use as sensors represent one of the most exciting new fields in analytical chemistry today. These systems are advantageous over currently available non-miniaturized sensors, such as quartz crystal microbalances, thickness shear mode resonators, and flexural plate wave oscillators, because of their high sensitivity, low cost and easy integration into automated systems. In this article, we present and discuss the evolution in the use of MEMS and NEMS, which are basically cantilever-type sensors, as good analytical tools for a wide variety of applications. We discuss the analytical features and the practical potential of micro(nano)-cantilever sensors, which combine the synergetic advantages of selectivity, provided by their functionalization, and the high sensitivity, which is attributed largely to the extremely small size of the sensing element. An insight is given into the different types of functionalization and detection strategies and a critical discussion is presented on the existing state of the art concerning the applications reported for mechanical microsensors. New developments and the possibilities for routine work in the near future are also covered.

Characterization of microcracks by application of digital image correlation to SPM images

NASA Astrophysics Data System (ADS)

Keller, Juergen; Gollhardt, Astrid; Vogel, Dietmar; Michel, Bernd

2004-07-01

With the development of micro- and nanotechnological products such as sensors, MEMS/NEMS and their broad application in a variety of market segments new reliability issues will arise. The increasing interface-to-volume ratio in highly integrated systems and nanoparticle filled materials and unsolved questions of size effect of nanomaterials are challenges for experimental reliability evaluation. To fulfill this needs the authors developed the nanoDAC method (nano Deformation Analysis by Correlation), which allows the determination and evaluation of 2D displacement fields based on scanning probe microscopy (SPM) data. In-situ SPM scans of the analyzed object are carried out at different thermo-mechanical load states. The obtained topography-, phase- or error-images are compared utilizing grayscale cross correlation algorithms. This allows the tracking of local image patterns of the analyzed surface structure. The measurement results of the nanoDAC method are full-field displacement and strain fields. Due to the application of SPM equipment deformations in the micro-, nanometer range can be easily detected. The method can be performed on bulk materials, thin films and on devices i.e microelectronic components, sensors or MEMS/NEMS. Furthermore, the characterization and evaluation of micro- and nanocracks or defects in bulk materials, thin layers and at material interfaces can be carried out.

Chemically Designed Metallic/Insulating Hybrid Nanostructures with Silver Nanocrystals for Highly Sensitive Wearable Pressure Sensors.

PubMed

Kim, Haneun; Lee, Seung-Wook; Joh, Hyungmok; Seong, Mingi; Lee, Woo Seok; Kang, Min Su; Pyo, Jun Beom; Oh, Soong Ju

2018-01-10

With the increase in interest in wearable tactile pressure sensors for e-skin, researches to make nanostructures to achieve high sensitivity have been actively conducted. However, limitations such as complex fabrication processes using expensive equipment still exist. Herein, simple lithography-free techniques to develop pyramid-like metal/insulator hybrid nanostructures utilizing nanocrystals (NCs) are demonstrated. Ligand-exchanged and unexchanged silver NC thin films are used as metallic and insulating components, respectively. The interfaces of each NC layer are chemically engineered to create discontinuous insulating layers, i.e., spacers for improved sensitivity, and eventually to realize fully solution-processed pressure sensors. Device performance analysis with structural, chemical, and electronic characterization and conductive atomic force microscopy study reveals that hybrid nanostructure based pressure sensor shows an enhanced sensitivity of higher than 500 kPa -1 , reliability, and low power consumption with a wide range of pressure sensing. Nano-/micro-hierarchical structures are also designed by combining hybrid nanostructures with conventional microstructures, exhibiting further enhanced sensing range and achieving a record sensitivity of 2.72 × 10 4 kPa -1 . Finally, all-solution-processed pressure sensor arrays with high pixel density, capable of detecting delicate signals with high spatial selectivity much better than the human tactile threshold, are introduced.

Experimental study on structural, optoelectronic and room temperature sensing performance of Nickel doped ZnO based ethanol sensors

NASA Astrophysics Data System (ADS)

Sudha, M.; Radha, S.; Kirubaveni, S.; Kiruthika, R.; Govindaraj, R.; Santhosh, N.

2018-04-01

Nano crystalline undoped (1Z) Zinc Oxide (ZnO) and 5, 10 and 15 Wt. % (1ZN, 2ZN and 3ZN) of Nickel doped ZnO based sensors were fabricated using the hydrothermal approach on Fluorine doped Tin Oxide (FTO) glass substrates. X-ray diffraction (XRD) analysis proved the hexagonal Wurtzite structure of ZnO. Parametric variations in terms of dislocation density, bond length, lattice parameters and micro strain with respect to dopant concentration were analysed. The prominent variations in the crystallite size, optical band gap and Photoluminescence peak ratio of devices fabricated was observed. The Field Emission Scanning Electron Microscope (FESEM) images showed a change in diameter and density of the nanorods. The effect of the operating temperature, concentration of ethanol and the different doping levels of sensitivity, response and recovery time were investigated. It was inferred that 376% of sensitivity with a very quick response and recovery time of <5 s and 10 s respectively at 150 °C of 3ZN sensor has better performance compared to other three sensors. Also 3ZN sensor showed improved sensitivity of 114%, even at room temperature with response and recovery time of 35 s and 45 s respectively.

Microscope-on-Chip Using Micro-Channel and Solid State Image Sensors

NASA Technical Reports Server (NTRS)

Wang, Yu

2000-01-01

Recently, Jet Propulsion Laboratory has invented and developed a miniature optical microscope, microscope-on-chip using micro-channel and solid state image sensors. It is lightweight, low-power, fast speed instrument, it has no image lens, does not need focus adjustment, and the total mass is less than 100g. A prototype has been built and demonstrated at JPL.

Micro-array versus nano-array platforms: a comparative study for ODN detection based on SPR enhanced ellipsometry

NASA Astrophysics Data System (ADS)

Celen, Burcu; Demirel, Gökhan; Piskin, Erhan

2011-04-01

The rapid and sensitive detection of DNA has recently attracted worldwide attention for a variety of disease diagnoses and detection of harmful bacteria in food and drink. In this paper, we carried out a comparative study based on surface plasmon resonance enhanced ellipsometry (SPREE) for the detection of oligodeoxynucleotides (ODNs) using micro- and nano-array platforms. The micro-arrayed surfaces were fabricated by a photolithography approach using different types of mask having varying size and shape. Well-ordered arrays of high aspect ratio polymeric nanotubes were also obtained using high molecular weight polystyrene (PS) and anodic aluminum oxide (AAO) membranes having 200 nm pore diameters. The SPREE sensors were then prepared by direct coupling of thiolated probe-ODNs, which contain suitable spacer arms, on gold-coated micro- and nano-arrayed surfaces. We experimentally demonstrated that, for the first time, gold-coated free standing polymeric nano-arrayed platforms can easily be produced and lead to a significant sensor sensitivity gain compared to that of the conventional SPREE surfaces of about four times. We believe that such an enhancement in sensor response could be useful for next generation sensor systems.

RNAimmuno: A database of the nonspecific immunological effects of RNA interference and microRNA reagents

PubMed Central

Olejniczak, Marta; Galka-Marciniak, Paulina; Polak, Katarzyna; Fligier, Andrzej; Krzyzosiak, Wlodzimierz J.

2012-01-01

The RNAimmuno database was created to provide easy access to information regarding the nonspecific effects generated in cells by RNA interference triggers and microRNA regulators. Various RNAi and microRNA reagents, which differ in length and structure, often cause non-sequence-specific immune responses, in addition to triggering the intended sequence-specific effects. The activation of the cellular sensors of foreign RNA or DNA may lead to the induction of type I interferon and proinflammatory cytokine release. Subsequent changes in the cellular transcriptome and proteome may result in adverse effects, including cell death during therapeutic treatments or the misinterpretation of experimental results in research applications. The manually curated RNAimmuno database gathers the majority of the published data regarding the immunological side effects that are caused in investigated cell lines, tissues, and model organisms by different reagents. The database is accessible at http://rnaimmuno.ibch.poznan.pl and may be helpful in the further application and development of RNAi- and microRNA-based technologies. PMID:22411954

RNAimmuno: a database of the nonspecific immunological effects of RNA interference and microRNA reagents.

PubMed

Olejniczak, Marta; Galka-Marciniak, Paulina; Polak, Katarzyna; Fligier, Andrzej; Krzyzosiak, Wlodzimierz J

2012-05-01

The RNAimmuno database was created to provide easy access to information regarding the nonspecific effects generated in cells by RNA interference triggers and microRNA regulators. Various RNAi and microRNA reagents, which differ in length and structure, often cause non-sequence-specific immune responses, in addition to triggering the intended sequence-specific effects. The activation of the cellular sensors of foreign RNA or DNA may lead to the induction of type I interferon and proinflammatory cytokine release. Subsequent changes in the cellular transcriptome and proteome may result in adverse effects, including cell death during therapeutic treatments or the misinterpretation of experimental results in research applications. The manually curated RNAimmuno database gathers the majority of the published data regarding the immunological side effects that are caused in investigated cell lines, tissues, and model organisms by different reagents. The database is accessible at http://rnaimmuno.ibch.poznan.pl and may be helpful in the further application and development of RNAi- and microRNA-based technologies.

Study on micro-bend light transmission performance of novel liquid-core optical fiber

NASA Astrophysics Data System (ADS)

Ma, Junyan; Zhao, Zhimin; Wang, Kaisheng; Guo, Linfeng

2007-01-01

With the increasing development of material technology and electronic integration technology, optical fiber and its using in smart structure have become hot in the field of material research. And liquid-core optical fiber is a special kind of optical fiber, which is made using liquid material as core and polymer material as optical layer and protective covering, and it has the characteristics of large core diameter, high numerical aperture, large-scope and efficient spectrum transmission and long life for using. So the liquid-core optical fiber is very suitable for spectrum cure, ultraviolet solidification, fluorescence detection, criminal investigation and evidence obtainment, etc, and especially as light transfer element in some new structures for the measurement of some signals, such as concentration, voltage, temperature, light intensity and so on. In this paper, the novel liquid-core optical fiber is self-made, and then through the test of its light transmission performance in free state, the relation between axial micro-bend and light-intensity loss are presented. When the liquid-core optical fiber is micro-bent axially, along with the axial displacement's increase, output power of light is reducing increasingly, and approximately has linear relation to micro-displacement in a range. According to the results liquid-core fiber-optic micro-bend sensor can be designed to measure micro-displacement of the tested objects. Experimental data and analysis provide experimental basis for further application of liquid-core optical fiber.

Comparisons of the diagnostic accuracies of optical coherence tomography, micro-computed tomography, and histology in periodontal disease: an ex vivo study

PubMed Central

2017-01-01

Purpose Optical coherence tomography (OCT) is a noninvasive diagnostic technique that may be useful for both qualitative and quantitative analyses of the periodontium. Micro-computed tomography (micro-CT) is another noninvasive imaging technique capable of providing submicron spatial resolution. The purpose of this study was to present periodontal images obtained using ex vivo dental OCT and to compare OCT images with micro-CT images and histologic sections. Methods Images of ex vivo canine periodontal structures were obtained using OCT. Biologic depth measurements made using OCT were compared to measurements made on histologic sections prepared from the same sites. Visual comparisons were made among OCT, micro-CT, and histologic sections to evaluate whether anatomical details were accurately revealed by OCT. Results The periodontal tissue contour, gingival sulcus, and the presence of supragingival and subgingival calculus could be visualized using OCT. OCT was able to depict the surface topography of the dentogingival complex with higher resolution than micro-CT, but the imaging depth was typically limited to 1.2–1.5 mm. Biologic depth measurements made using OCT were a mean of 0.51 mm shallower than the histologic measurements. Conclusions Dental OCT as used in this study was able to generate high-resolution, cross-sectional images of the superficial portions of periodontal structures. Improvements in imaging depth and the development of an intraoral sensor are likely to make OCT a useful technique for periodontal applications. PMID:28261522

Aerospace Sensor Systems: From Sensor Development To Vehicle Application

NASA Technical Reports Server (NTRS)

Hunter, Gary W.

2008-01-01

This paper presents an overview of years of sensor system development and application for aerospace systems. The emphasis of this work is on developing advanced capabilities for measurement and control of aeropropulsion and crew vehicle systems as well as monitoring the safety of those systems. Specific areas of work include chemical species sensors, thin film thermocouples and strain gages, heat flux gages, fuel gages, SiC based electronic devices and sensors, space qualified electronics, and MicroElectroMechanical Systems (MEMS) as well as integrated and multifunctional sensor systems. Each sensor type has its own technical challenges related to integration and reliability in a given application. The general approach has been to develop base sensor technology using microfabrication techniques, integrate sensors with "smart" hardware and software, and demonstrate those systems in a range of aerospace applications. Descriptions of the sensor elements, their integration into sensors systems, and examples of sensor system applications will be discussed. Finally, suggestions related to the future of sensor technology will be given. It is concluded that smart micro/nano sensor technology can revolutionize aerospace applications, but significant challenges exist in maturing the technology and demonstrating its value in real-life applications.

MicroSensors Systems: detection of a dismounted threat

NASA Astrophysics Data System (ADS)

Davis, Bill; Berglund, Victor; Falkofske, Dwight; Krantz, Brian

2005-05-01

The Micro Sensor System (MSS) is a layered sensor network with the goal of detecting dismounted threats approaching high value assets. A low power unattended ground sensor network is dependant on a network protocol for efficiency in order to minimize data transmissions after network establishment. The reduction of network 'chattiness' is a primary driver for minimizing power consumption and is a factor in establishing a low probability of detection and interception. The MSS has developed a unique protocol to meet these challenges. Unattended ground sensor systems are most likely dependant on batteries for power which due to size determines the ability of the sensor to be concealed after placement. To minimize power requirements, overcome size limitations, and maintain a low system cost the MSS utilizes advanced manufacturing processes know as Fluidic Self-Assembly and Chip Scale Packaging. The type of sensing element and the ability to sense various phenomenologies (particularly magnetic) at ranges greater than a few meters limits the effectiveness of a system. The MicroSensor System will overcome these limitations by deploying large numbers of low cost sensors, which is made possible by the advanced manufacturing process used in production of the sensors. The MSS program will provide unprecedented levels of real-time battlefield information which greatly enhances combat situational awareness when integrated with the existing Command, Control, Communications, Computers, Intelligence, Surveillance and Reconnaissance (C4ISR) infrastructure. This system will provide an important boost to realizing the information dominant, network-centric objective of Joint Vision 2020.

HIgh-Q Optical Micro-cavity Resonators as High Sensitive Bio-chemical and Ultrasonic Sensors

NASA Astrophysics Data System (ADS)

Ling, Tao

Optical micro-cavity resonators have quickly emerged in the past few years as a new sensing platform in a wide range of applications, such as bio-chemical molecular detection, environmental monitoring, acoustic and electromagnetic waves detection. In this thesis, we will mainly focus on developing high sensitivity silica micro-tube resonator bio-chemical sensors and high sensitivity polymer micro-ring resonator acoustic sensors. In high sensitivity silica micro-tube resonator bio-chemical sensors part: We first demonstrated a prism coupled silica micro-tube bio-chemical sensing platform to overcome the reliability problem in a fiber coupled thin wall silica micro-tube sensing platform. In refractive index sensing experiment, a unique resonance mode with sensitivity around 600nm/refractive index unit (RIU) has been observed. Surface sensing experiments also have been performed in this platform to detect lipid monolayer, lipid bilayer, electrostatic self assemble layer-by-layer as well as the interaction between the lipid bilayer and proteins. Then a theoretical study on various sensing properties on the silica micro-tube based sensing platform has been realized. Furthermore, we have proposed a coupled cavity system to further enhance the device's sensitivity above 1000nm/RIU. In high sensitivity polymer micro-ring resonator acoustic sensors part: We first presented a simplified fabrication process and realized a polymer microring with a Q factor around 6000. The fabricated device has been used to detect acoustic wave with noise equivalent pressure (NEP) around 230Pa over 1-75MHz frequency rang, which is comparable to state-of-art piezoelectric transducer and the device's frequency response also have been characterized to be up to 90MHz. A new fabrication process combined with resist reflow and thermal oxidation process has been used to improve the Q factor up to 10 5 and the device's NEP has been tested to be around 88Pa over 1-75MHz range. Further improving the device's Q factor has been realized by shifting the device's working wavelength to near-visible wavelength and further reducing the device's sidewall roughness. A record new high Q-˜x105 has been measured and the device's NEP as low as 21Pa has been measured. Furthermore, a smaller size polymer microring device has been developed and fabricated to realize larger angle beam forming applications.

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.

PubMed

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining

2017-01-28

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

PubMed Central

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining

2017-01-01

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system. PMID:28134854

Silicon Nanotips Antireflection Surface for Micro Sun Sensor

NASA Technical Reports Server (NTRS)

Bae, Sam Y.; Lee, Choonsup; Mobasser, Sohrab; Manohara, Harish

2006-01-01

We have developed a new technique to fabricate antireflection surface using silicon nano-tips for use on a micro sun sensor for Mars rovers. We have achieved randomly distributed nano-tips of radius spanning from 20 nm to 100 nm and aspect ratio of 200 using a two-step dry etching process. The 30(deg) specular reflectance at the target wavelength of 1 (mu)m is only about 0.09 %, nearly three orders of magnitude lower than that of bare silicon, and the hemispherical reflectance is 8%. By changing the density and aspect ratio of these nanotips, the change in reflectance is demonstrated. Using surfaces covered with these nano-tips, the critical problem of ghost images that are caused by multiple internal reflections in a micro sun sensor was solved.

Fly eye radar or micro-radar sensor technology

NASA Astrophysics Data System (ADS)

Molchanov, Pavlo; Asmolova, Olga

2014-05-01

To compensate for its eye's inability to point its eye at a target, the fly's eye consists of multiple angularly spaced sensors giving the fly the wide-area visual coverage it needs to detect and avoid the threats around him. Based on a similar concept a revolutionary new micro-radar sensor technology is proposed for detecting and tracking ground and/or airborne low profile low altitude targets in harsh urban environments. Distributed along a border or around a protected object (military facility and buildings, camp, stadium) small size, low power unattended radar sensors can be used for target detection and tracking, threat warning, pre-shot sniper protection and provides effective support for homeland security. In addition it can provide 3D recognition and targets classification due to its use of five orders more pulses than any scanning radar to each space point, by using few points of view, diversity signals and intelligent processing. The application of an array of directional antennas eliminates the need for a mechanical scanning antenna or phase processor. It radically decreases radar size and increases bearing accuracy several folds. The proposed micro-radar sensors can be easy connected to one or several operators by point-to-point invisible protected communication. The directional antennas have higher gain, can be multi-frequency and connected to a multi-functional network. Fly eye micro-radars are inexpensive, can be expendable and will reduce cost of defense.

Iron oxide/carbon black (Fe2O3/CB) composite electrode for the detection of reduced nicotinamide cofactors using an amperometric method under a low overpotential.

PubMed

Kim, Yang Hee; Kim, Taeho; Ryu, Ji Heon; Yoo, Young Je

2010-01-15

An amperometric biosensor for the detection of the reduced nicotinamide cofactors NADH and NADPH was designed, based on the electrochemical oxidation of NAD(P)H with an iron oxide/carbon black composite (Fe(2)O(3)/CB) electrode. The electrode exhibited excellent performances in that it led to a substantial decrease in the overpotential of electrochemical NADH oxidation. Iron oxide plays a significant role as a catalyst for NADH oxidation and the reaction occurs at +0.00 V (vs. Ag/AgCl). The method of the sensor construction is very simple and the sensor performed well, giving high sensitivity, high stability, and a broad detection range. The sensitivity of this system is 2.54 microA mM(-1) and the limit of detection (S/N=3) is 10 microM. A linear range was observed between 10 microM and 1000 microM of NADH (R(2)=0.993), which is preferable to that of the previous studies. The Fe(2)O(3)/CB electrode also oxidizes NADPH under the same condition and can be applied as an NADPH sensor. Moreover, when the sensor system was integrated into a dehydrogenase-based sensor system, it also showed a good sensing performance. Copyright 2009 Elsevier B.V. All rights reserved.

Surface acoustic waves/silicon monolithic sensor processor

NASA Technical Reports Server (NTRS)

Kowel, S. T.; Kornreich, P. G.; Fathimulla, M. A.; Mehter, E. A.

1981-01-01

Progress is reported in the creation of a two dimensional Fourier transformer for optical images based on the zinc oxide on silicon technology. The sputtering of zinc oxide films using a micro etch system and the possibility of a spray-on technique based on zinc chloride dissolved in alcohol solution are discussed. Refinements to techniques for making platinum silicide Schottky barrier junctions essential for constructing the ultimate convolver structure are described.

Mechanical studies towards a silicon micro-strip super module for the ATLAS inner detector upgrade at the high luminosity LHC

NASA Astrophysics Data System (ADS)

Barbier, G.; Cadoux, F.; Clark, A.; Endo, M.; Favre, Y.; Ferrere, D.; Gonzalez-Sevilla, S.; Hanagaki, K.; Hara, K.; Iacobucci, G.; Ikegami, Y.; Jinnouchi, O.; La Marra, D.; Nakamura, K.; Nishimura, R.; Perrin, E.; Seez, W.; Takubo, Y.; Takashima, R.; Terada, S.; Todome, K.; Unno, Y.; Weber, M.

2014-04-01

It is expected that after several years of data-taking, the Large Hadron Collider (LHC) physics programme will be extended to the so-called High-Luminosity LHC, where the instantaneous luminosity will be increased up to 5 × 1034 cm-2 s-1. For the general-purpose ATLAS experiment at the LHC, a complete replacement of its internal tracking detector will be necessary, as the existing detector will not provide the required performance due to the cumulated radiation damage and the increase in the detector occupancy. The baseline layout for the new ATLAS tracker is an all-silicon-based detector, with pixel sensors in the inner layers and silicon micro-strip detectors at intermediate and outer radii. The super-module (SM) is an integration concept proposed for the barrel strip region of the future ATLAS tracker, where double-sided stereo silicon micro-strip modules (DSM) are assembled into a low-mass local support (LS) structure. Mechanical aspects of the proposed LS structure are described.

A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

PubMed Central

Takahata, Kenichi; Gianchandani, Yogesh B.

2008-01-01

This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane room-temperature-vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μm-diameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated. PMID:27879824

Demonstration of versatile whispering-gallery micro-lasers for remote refractive index sensing.

PubMed

Wan, Lei; Chandrahalim, Hengky; Zhou, Jian; Li, Zhaohui; Chen, Cong; Cho, Sangha; Zhang, Hui; Mei, Ting; Tian, Huiping; Oki, Yuji; Nishimura, Naoya; Fan, Xudong; Guo, L Jay

2018-03-05

We developed chip-scale remote refractive index sensors based on Rhodamine 6G (R6G)-doped polymer micro-ring lasers. The chemical, temperature, and mechanical sturdiness of the fused-silica host guaranteed a flexible deployment of dye-doped polymers for refractive index sensing. The introduction of the dye as gain medium demonstrated the feasibility of remote sensing based on the free-space optics measurement setup. Compared to the R6G-doped TZ-001, the lasing behavior of R6G-doped SU-8 polymer micro-ring laser under an aqueous environment had a narrower spectrum linewidth, producing the minimum detectable refractive index change of 4 × 10 -4 RIU. The maximum bulk refractive index sensitivity (BRIS) of 75 nm/RIU was obtained for SU-8 laser-based refractive index sensors. The economical, rapid, and simple realization of polymeric micro-scale whispering-gallery-mode (WGM) laser-based refractive index sensors will further expand pathways of static and dynamic remote environmental, chemical, biological, and bio-chemical sensing.

Semiselective Optoelectronic Sensors for Monitoring Microbes

NASA Technical Reports Server (NTRS)

Tabacco, Mary Beth; Chuang, Han; Taylor,Laura; Russo, Jaime

2003-01-01

Sensor systems are under development for use in real-time detection and quantitation of microbes in water without need for sampling. These systems include arrays of optical sensors; miniature, portable electronic data-acquisition circuits; and optoelectronic interfaces between the sensor arrays and data-acquisition circuits. These systems are intended for original use in long-term, inline monitoring of waterborne micro-organisms in water-reclamation systems aboard future spacecraft. They could also be adapted to similar terrestrial uses with respect to municipal water supplies, stored drinking water, and swimming water; for detecting low-level biological contamination in biotechnological, semiconductor, and pharmaceutical process streams; and in verifying the safety of foods and beverages. In addition, they could be adapted to monitoring of airborne microbes and of surfaces (e.g., to detect and/or quantitate biofilms). The designs of the sensors in these systems are based partly on those of sensors developed previously for monitoring airborne biological materials. The designs exploit molecular- recognition and fluorescence-spectroscopy techniques, such that in the presence of micro-organisms of interest, fluorescence signals change and the changes can be measured. These systems are characterized as semiselective because they respond to classes of micro-organisms and can be used to discriminate among the classes. This semiselectivity is a major aspect of the design: It is important to distinguish between (1) the principle of detection and quantitation of classes of micro-organisms by use of these sensors and (2) the principle of detection and quantitation of individual microbiological species by means of prior immuno-diagnostic and/or molecular-biology techniques. Detection of classes (in contradistinction to species) is particularly valuable when the exact nature of a contaminant is unknown.

Roadmap on optical sensors.

PubMed

Ferreira, Mário F S; Castro-Camus, Enrique; Ottaway, David J; López-Higuera, José Miguel; Feng, Xian; Jin, Wei; Jeong, Yoonchan; Picqué, Nathalie; Tong, Limin; Reinhard, Björn M; Pellegrino, Paul M; Méndez, Alexis; Diem, Max; Vollmer, Frank; Quan, Qimin

2017-08-01

Sensors are devices or systems able to detect, measure and convert magnitudes from any domain to an electrical one. Using light as a probe for optical sensing is one of the most efficient approaches for this purpose. The history of optical sensing using some methods based on absorbance, emissive and florescence properties date back to the 16th century. The field of optical sensors evolved during the following centuries, but it did not achieve maturity until the demonstration of the first laser in 1960. The unique properties of laser light become particularly important in the case of laser-based sensors, whose operation is entirely based upon the direct detection of laser light itself, without relying on any additional mediating device. However, compared with freely propagating light beams, artificially engineered optical fields are in increasing demand for probing samples with very small sizes and/or weak light-matter interaction. Optical fiber sensors constitute a subarea of optical sensors in which fiber technologies are employed. Different types of specialty and photonic crystal fibers provide improved performance and novel sensing concepts. Actually, structurization with wavelength or subwavelength feature size appears as the most efficient way to enhance sensor sensitivity and its detection limit. This leads to the area of micro- and nano-engineered optical sensors. It is expected that the combination of better fabrication techniques and new physical effects may open new and fascinating opportunities in this area. This roadmap on optical sensors addresses different technologies and application areas of the field. Fourteen contributions authored by experts from both industry and academia provide insights into the current state-of-the-art and the challenges faced by researchers currently. Two sections of this paper provide an overview of laser-based and frequency comb-based sensors. Three sections address the area of optical fiber sensors, encompassing both conventional, specialty and photonic crystal fibers. Several other sections are dedicated to micro- and nano-engineered sensors, including whispering-gallery mode and plasmonic sensors. The uses of optical sensors in chemical, biological and biomedical areas are described in other sections. Different approaches required to satisfy applications at visible, infrared and THz spectral regions are also discussed. Advances in science and technology required to meet challenges faced in each of these areas are addressed, together with suggestions on how the field could evolve in the near future.

Roadmap on optical sensors

NASA Astrophysics Data System (ADS)

Ferreira, Mário F. S.; Castro-Camus, Enrique; Ottaway, David J.; López-Higuera, José Miguel; Feng, Xian; Jin, Wei; Jeong, Yoonchan; Picqué, Nathalie; Tong, Limin; Reinhard, Björn M.; Pellegrino, Paul M.; Méndez, Alexis; Diem, Max; Vollmer, Frank; Quan, Qimin

2017-08-01

Sensors are devices or systems able to detect, measure and convert magnitudes from any domain to an electrical one. Using light as a probe for optical sensing is one of the most efficient approaches for this purpose. The history of optical sensing using some methods based on absorbance, emissive and florescence properties date back to the 16th century. The field of optical sensors evolved during the following centuries, but it did not achieve maturity until the demonstration of the first laser in 1960. The unique properties of laser light become particularly important in the case of laser-based sensors, whose operation is entirely based upon the direct detection of laser light itself, without relying on any additional mediating device. However, compared with freely propagating light beams, artificially engineered optical fields are in increasing demand for probing samples with very small sizes and/or weak light-matter interaction. Optical fiber sensors constitute a subarea of optical sensors in which fiber technologies are employed. Different types of specialty and photonic crystal fibers provide improved performance and novel sensing concepts. Actually, structurization with wavelength or subwavelength feature size appears as the most efficient way to enhance sensor sensitivity and its detection limit. This leads to the area of micro- and nano-engineered optical sensors. It is expected that the combination of better fabrication techniques and new physical effects may open new and fascinating opportunities in this area. This roadmap on optical sensors addresses different technologies and application areas of the field. Fourteen contributions authored by experts from both industry and academia provide insights into the current state-of-the-art and the challenges faced by researchers currently. Two sections of this paper provide an overview of laser-based and frequency comb-based sensors. Three sections address the area of optical fiber sensors, encompassing both conventional, specialty and photonic crystal fibers. Several other sections are dedicated to micro- and nano-engineered sensors, including whispering-gallery mode and plasmonic sensors. The uses of optical sensors in chemical, biological and biomedical areas are described in other sections. Different approaches required to satisfy applications at visible, infrared and THz spectral regions are also discussed. Advances in science and technology required to meet challenges faced in each of these areas are addressed, together with suggestions on how the field could evolve in the near future.

Fault Diagnosis for Micro-Gas Turbine Engine Sensors via Wavelet Entropy

PubMed Central

Yu, Bing; Liu, Dongdong; Zhang, Tianhong

2011-01-01

Sensor fault diagnosis is necessary to ensure the normal operation of a gas turbine system. However, the existing methods require too many resources and this need can’t be satisfied in some occasions. Since the sensor readings are directly affected by sensor state, sensor fault diagnosis can be performed by extracting features of the measured signals. This paper proposes a novel fault diagnosis method for sensors based on wavelet entropy. Based on the wavelet theory, wavelet decomposition is utilized to decompose the signal in different scales. Then the instantaneous wavelet energy entropy (IWEE) and instantaneous wavelet singular entropy (IWSE) are defined based on the previous wavelet entropy theory. Subsequently, a fault diagnosis method for gas turbine sensors is proposed based on the results of a numerically simulated example. Then, experiments on this method are carried out on a real micro gas turbine engine. In the experiment, four types of faults with different magnitudes are presented. The experimental results show that the proposed method for sensor fault diagnosis is efficient. PMID:22163734

Fault diagnosis for micro-gas turbine engine sensors via wavelet entropy.

PubMed

Yu, Bing; Liu, Dongdong; Zhang, Tianhong

2011-01-01

Sensor fault diagnosis is necessary to ensure the normal operation of a gas turbine system. However, the existing methods require too many resources and this need can't be satisfied in some occasions. Since the sensor readings are directly affected by sensor state, sensor fault diagnosis can be performed by extracting features of the measured signals. This paper proposes a novel fault diagnosis method for sensors based on wavelet entropy. Based on the wavelet theory, wavelet decomposition is utilized to decompose the signal in different scales. Then the instantaneous wavelet energy entropy (IWEE) and instantaneous wavelet singular entropy (IWSE) are defined based on the previous wavelet entropy theory. Subsequently, a fault diagnosis method for gas turbine sensors is proposed based on the results of a numerically simulated example. Then, experiments on this method are carried out on a real micro gas turbine engine. In the experiment, four types of faults with different magnitudes are presented. The experimental results show that the proposed method for sensor fault diagnosis is efficient.

Femtosecond laser processing of optical fibres for novel sensor development

NASA Astrophysics Data System (ADS)

Kalli, Kyriacos; Theodosiou, Antreas; Ioannou, Andreas; Lacraz, Amedee

2017-04-01

We present results of recent research where we have utilized a femtosecond laser to micro-structure silica and polymer optical fibres in order to realize versatile optical components such as diffractive optical elements on the fibre end face, the inscription of integrated waveguide circuits in the fibre cladding and novel optical fibre sensors designs based on Bragg gratings in the core. A major hurdle in tailoring or modifying the properties of optical fibres is the development of an inscription method that can prove to be a flexible and reliable process that is generally applicable to all optical fibre types; this requires careful matching of the laser parameters and optics in order to examine the spatial limits of direct laser writing, whether the application is structuring at the surface of the optical fibre or inscription in the core and cladding of the fibre. We demonstrate a variety of optical components such as two-dimensional grating structures, Bessel, Airy and vortex beam generators; moreover, optical bridging waveguides inscribed in the cladding of single-mode fibre as a means to selectively couple light from single-core to multi-core optical fibres, and demonstrate a grating based sensor; finally, we have developed a novel femtosecond laser inscription method for the precise inscription of tailored Bragg grating sensors in silica and polymer optical fibres. We also show that this novel fibre Bragg grating inscription technique can be used to modify and add versatility to an existing, encapsulated optical fibre pressure sensor.

An error-based micro-sensor capture system for real-time motion estimation

NASA Astrophysics Data System (ADS)

Yang, Lin; Ye, Shiwei; Wang, Zhibo; Huang, Zhipei; Wu, Jiankang; Kong, Yongmei; Zhang, Li

2017-10-01

A wearable micro-sensor motion capture system with 16 IMUs and an error-compensatory complementary filter algorithm for real-time motion estimation has been developed to acquire accurate 3D orientation and displacement in real life activities. In the proposed filter algorithm, the gyroscope bias error, orientation error and magnetic disturbance error are estimated and compensated, significantly reducing the orientation estimation error due to sensor noise and drift. Displacement estimation, especially for activities such as jumping, has been the challenge in micro-sensor motion capture. An adaptive gait phase detection algorithm has been developed to accommodate accurate displacement estimation in different types of activities. The performance of this system is benchmarked with respect to the results of VICON optical capture system. The experimental results have demonstrated effectiveness of the system in daily activities tracking, with estimation error 0.16 ± 0.06 m for normal walking and 0.13 ± 0.11 m for jumping motions. Research supported by the National Natural Science Foundation of China (Nos. 61431017, 81272166).

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator.

PubMed

Yebo, Nebiyu A; Sree, Sreeprasanth Pulinthanathu; Levrau, Elisabeth; Detavernier, Christophe; Hens, Zeger; Martens, Johan A; Baets, Roel

2012-05-21

Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH(3)with selectivity relative to CO(2). The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH(3) within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications.

Research on Flow Field Perception Based on Artificial Lateral Line Sensor System.

PubMed

Liu, Guijie; Wang, Mengmeng; Wang, Anyi; Wang, Shirui; Yang, Tingting; Malekian, Reza; Li, Zhixiong

2018-03-11

In nature, the lateral line of fish is a peculiar and important organ for sensing the surrounding hydrodynamic environment, preying, escaping from predators and schooling. In this paper, by imitating the mechanism of fish lateral canal neuromasts, we developed an artificial lateral line system composed of micro-pressure sensors. Through hydrodynamic simulations, an optimized sensor structure was obtained and the pressure distribution models of the lateral surface were established in uniform flow and turbulent flow. Carrying out the corresponding underwater experiment, the validity of the numerical simulation method is verified by the comparison between the experimental data and the simulation results. In addition, a variety of effective research methods are proposed and validated for the flow velocity estimation and attitude perception in turbulent flow, respectively and the shape recognition of obstacles is realized by the neural network algorithm.

Computational multispectral video imaging [Invited].

PubMed

Wang, Peng; Menon, Rajesh

2018-01-01

Multispectral imagers reveal information unperceivable to humans and conventional cameras. Here, we demonstrate a compact single-shot multispectral video-imaging camera by placing a micro-structured diffractive filter in close proximity to the image sensor. The diffractive filter converts spectral information to a spatial code on the sensor pixels. Following a calibration step, this code can be inverted via regularization-based linear algebra to compute the multispectral image. We experimentally demonstrated spectral resolution of 9.6 nm within the visible band (430-718 nm). We further show that the spatial resolution is enhanced by over 30% compared with the case without the diffractive filter. We also demonstrate Vis-IR imaging with the same sensor. Because no absorptive color filters are utilized, sensitivity is preserved as well. Finally, the diffractive filters can be easily manufactured using optical lithography and replication techniques.

Study on the Correlation between Humidity and Material Strains in Separable Micro Humidity Sensor Design.

PubMed

Chang, Chih-Yuan

2017-05-08

Incidents of injuries caused by tiles falling from building exterior walls are frequently reported in Taiwan. Humidity is an influential factor in tile deterioration but it is more difficult to measure the humidity inside a building structure than the humidity in an indoor environment. Therefore, a separable microsensor was developed in this study to measure the humidity of the cement mortar layer with a thickness of 1.5-2 cm inside the external wall of a building. 3D printing technology is used to produce an encapsulation box that can protect the sensor from damage caused by the concrete and cement mortar. The sensor is proven in this study to be capable of measuring temperature and humidity simultaneously and the measurement results are then used to analyze the influence of humidity on external wall tile deterioration.

A novel optical system design of light field camera

NASA Astrophysics Data System (ADS)

Wang, Ye; Li, Wenhua; Hao, Chenyang

2016-01-01

The structure of main lens - Micro Lens Array (MLA) - imaging sensor is usually adopted in optical system of light field camera, and the MLA is the most important part in the optical system, which has the function of collecting and recording the amplitude and phase information of the field light. In this paper, a novel optical system structure is proposed. The novel optical system is based on the 4f optical structure, and the micro-aperture array (MAA) is used to instead of the MLA for realizing the information acquisition of the 4D light field. We analyze the principle that the novel optical system could realize the information acquisition of the light field. At the same time, a simple MAA, line grating optical system, is designed by ZEMAX software in this paper. The novel optical system is simulated by a line grating optical system, and multiple images are obtained in the image plane. The imaging quality of the novel optical system is analyzed.

Stochastic global identification of a bio-inspired self-sensing composite UAV wing via wind tunnel experiments

NASA Astrophysics Data System (ADS)

Kopsaftopoulos, Fotios; Nardari, Raphael; Li, Yu-Hung; Wang, Pengchuan; Chang, Fu-Kuo

2016-04-01

In this work, the system design, integration, and wind tunnel experimental evaluation are presented for a bioinspired self-sensing intelligent composite unmanned aerial vehicle (UAV) wing. A total of 148 micro-sensors, including piezoelectric, strain, and temperature sensors, in the form of stretchable sensor networks are embedded in the layup of a composite wing in order to enable its self-sensing capabilities. Novel stochastic system identification techniques based on time series models and statistical parameter estimation are employed in order to accurately interpret the sensing data and extract real-time information on the coupled air flow-structural dynamics. Special emphasis is given to the wind tunnel experimental assessment under various flight conditions defined by multiple airspeeds and angles of attack. A novel modeling approach based on the recently introduced Vector-dependent Functionally Pooled (VFP) model structure is employed for the stochastic identification of the "global" coupled airflow-structural dynamics of the wing and their correlation with dynamic utter and stall. The obtained results demonstrate the successful system-level integration and effectiveness of the stochastic identification approach, thus opening new perspectives for the state sensing and awareness capabilities of the next generation of "fly-by-fee" UAVs.

Plenoptic Imager for Automated Surface Navigation

NASA Technical Reports Server (NTRS)

Zollar, Byron; Milder, Andrew; Milder, Andrew; Mayo, Michael

2010-01-01

An electro-optical imaging device is capable of autonomously determining the range to objects in a scene without the use of active emitters or multiple apertures. The novel, automated, low-power imaging system is based on a plenoptic camera design that was constructed as a breadboard system. Nanohmics proved feasibility of the concept by designing an optical system for a prototype plenoptic camera, developing simulated plenoptic images and range-calculation algorithms, constructing a breadboard prototype plenoptic camera, and processing images (including range calculations) from the prototype system. The breadboard demonstration included an optical subsystem comprised of a main aperture lens, a mechanical structure that holds an array of micro lenses at the focal distance from the main lens, and a structure that mates a CMOS imaging sensor the correct distance from the micro lenses. The demonstrator also featured embedded electronics for camera readout, and a post-processor executing image-processing algorithms to provide ranging information.

Real time monitoring of progressive damage during loading of a simplified total hip stem construct using embedded acoustic emission sensors.

PubMed

Mavrogordato, Mark; Taylor, Mark; Taylor, Andrew; Browne, Martin

2011-05-01

Acoustic emission (AE) is a non-destructive technique that is capable of passively monitoring failure of a construct with excellent temporal resolution. Previous investigations using AE to monitor the integrity of a total hip replacement (THR) have used surface mounted sensors; however, the AE signal attenuates as it travels through materials and across interfaces. This study proposes that directly embedded sensors within the femoral stem of the implant will reduce signal attenuation effects and eliminate potential complications and variability associated with fixing the sensor to the sample. Data was collected during in vitro testing of implanted constructs, and information from both embedded and externally mounted AE sensors was compared and corroborated by micro-Computed Tomography (micro-CT) images taken before and after testing. The results of this study indicate that the embedded sensors gave a closer corroboration to observed damage using micro-CT and were less affected by unwanted noise sources. This has significant implications for the use of AE in assessing the state of THR constructs in vitro and it is hypothesised that directly embedded AE sensors may provide the first steps towards an in vivo, cost effective, user friendly, non-destructive system capable of continuously monitoring the condition of the implanted construct. Copyright © 2010 IPEM. Published by Elsevier Ltd. All rights reserved.

Polymer encapsulated microcavity optomechanical magnetometer

DOE PAGES

Zhu, Jiangang; Zhao, Guangming; Savukov, Igor; ...

2017-08-21

We demonstrate a magnetometer using polymer encapsulated whispering-gallery-mode microcavity actuated by a micro-magnet. The magnetic field induces force on the micro-magnet causing deformation in the polymer around the microcavity. Subsequently the microcavity detects the change in the refractive index of the polymer resulted from the deformation. This magnetometer works in the frequency range of hertz-to-kilohertz range and achieves a sensitivity of 880 pT/Hz 1/2 at 200 Hz in a micro-scale sensor volume. Polymer encapsulation of the magnetometer and fiber optical connection ensures environmental robustness and practicality of the sensor.

Integrated Navigation System Design for Micro Planetary Rovers: Comparison of Absolute Heading Estimation Algorithms and Nonlinear Filtering

PubMed Central

Ilyas, Muhammad; Hong, Beomjin; Cho, Kuk; Baeg, Seung-Ho; Park, Sangdeok

2016-01-01

This paper provides algorithms to fuse relative and absolute microelectromechanical systems (MEMS) navigation sensors, suitable for micro planetary rovers, to provide a more accurate estimation of navigation information, specifically, attitude and position. Planetary rovers have extremely slow speed (~1 cm/s) and lack conventional navigation sensors/systems, hence the general methods of terrestrial navigation may not be applicable to these applications. While relative attitude and position can be tracked in a way similar to those for ground robots, absolute navigation information is hard to achieve on a remote celestial body, like Moon or Mars, in contrast to terrestrial applications. In this study, two absolute attitude estimation algorithms were developed and compared for accuracy and robustness. The estimated absolute attitude was fused with the relative attitude sensors in a framework of nonlinear filters. The nonlinear Extended Kalman filter (EKF) and Unscented Kalman filter (UKF) were compared in pursuit of better accuracy and reliability in this nonlinear estimation problem, using only on-board low cost MEMS sensors. Experimental results confirmed the viability of the proposed algorithms and the sensor suite, for low cost and low weight micro planetary rovers. It is demonstrated that integrating the relative and absolute navigation MEMS sensors reduces the navigation errors to the desired level. PMID:27223293

Micro-Electromechanical Affinity Sensor for the Monitoring of Glucose in Bioprocess Media

PubMed Central

Theuer, Lorenz; Lehmann, Micha; Junne, Stefan; Neubauer, Peter; Birkholz, Mario

2017-01-01

An affinity-viscometry-based micro-sensor probe for continuous glucose monitoring was investigated with respect to its suitability for bioprocesses. The sensor operates with glucose and dextran competing as binding partner for concanavalin A, while the viscosity of the assay scales with glucose concentration. Changes in viscosity are determined with a micro-electromechanical system (MEMS) in the measurement cavity of the sensor probe. The study aimed to elucidate the interactions between the assay and a typical phosphate buffered bacterial cultivation medium. It turned out that contact with the medium resulted in a significant long-lasting drift of the assay’s viscosity at zero glucose concentration. Adding glucose to the medium lowers the drift by a factor of eight. The cglc values measured off-line with the glucose sensor for monitoring of a bacterial cultivation were similar to the measurements with an enzymatic assay with a difference of less than ±0.15 g·L−1. We propose that lectin agglomeration, the electro-viscous effect, and constitutional changes of concanavalin A due to exchanges of the incorporated metal ions may account for the observed viscosity increase. The study has demonstrated the potential of the MEMS sensor to determine sensitive viscosity changes within very small sample volumes, which could be of interest for various biotechnological applications. PMID:28594350

Integrated Navigation System Design for Micro Planetary Rovers: Comparison of Absolute Heading Estimation Algorithms and Nonlinear Filtering.

PubMed

Ilyas, Muhammad; Hong, Beomjin; Cho, Kuk; Baeg, Seung-Ho; Park, Sangdeok

2016-05-23

This paper provides algorithms to fuse relative and absolute microelectromechanical systems (MEMS) navigation sensors, suitable for micro planetary rovers, to provide a more accurate estimation of navigation information, specifically, attitude and position. Planetary rovers have extremely slow speed (~1 cm/s) and lack conventional navigation sensors/systems, hence the general methods of terrestrial navigation may not be applicable to these applications. While relative attitude and position can be tracked in a way similar to those for ground robots, absolute navigation information is hard to achieve on a remote celestial body, like Moon or Mars, in contrast to terrestrial applications. In this study, two absolute attitude estimation algorithms were developed and compared for accuracy and robustness. The estimated absolute attitude was fused with the relative attitude sensors in a framework of nonlinear filters. The nonlinear Extended Kalman filter (EKF) and Unscented Kalman filter (UKF) were compared in pursuit of better accuracy and reliability in this nonlinear estimation problem, using only on-board low cost MEMS sensors. Experimental results confirmed the viability of the proposed algorithms and the sensor suite, for low cost and low weight micro planetary rovers. It is demonstrated that integrating the relative and absolute navigation MEMS sensors reduces the navigation errors to the desired level.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hopmann, Ch.; Weber, M.; Schöngart, M.

Micro structured optical plastics components are intensively used i. e. in consumer electronics, for optical sensors in metrology, innovative LED-lighting or laser technology. Injection moulding has proven to be successful for the large-scale production of those parts. However, the production of those parts still causes difficulties due to challenges in the moulding and demoulding of plastics parts created with laser structured mould inserts. A complete moulding of the structures often leads to increased demoulding forces, which then cause a breaking of the structures and a clogging of the mould. An innovative approach is to combine PVD-coated (physical vapour deposition), lasermore » structured inserts and a variothermal moulding process to create functional mic8iüro structures in a one-step process. Therefore, a PVD-coating is applied after the laser structuring process in order to improve the wear resistance and the anti-adhesive properties against the plastics melt. In a series of moulding trials with polycarbonate (PC) and polymethylmethacrylate (PMMA) using different coated moulds, the mould temperature during injection was varied in the range of the glass transition and the melt temperature of the polymers. Subsequently, the surface topography of the moulded parts is evaluated by digital 3D laser-scanning microscopy. The influence of the moulding parameters and the coating of the mould insert on the moulding accuracy and the demoulding behaviour are being analysed. It is shown that micro structures created by ultra-short pulse laser ablation can be successfully replicated in a variothermal moulding process. Due to the mould coating, significant improvements could be achieved in producing micro structured optical plastics components.« less

A long-term stable power supply μDMFC stack for wireless sensor node applications

NASA Astrophysics Data System (ADS)

Wu, Z. L.; Wang, X. H.; Teng, F.; Li, X. Z.; Wu, X. M.; Liu, L. T.

2013-12-01

A passive, air-breathing 4-cell micro direct methanol fuel cell (μDMFC) stack is presented featured by a fuel delivery structure for a long-term & stable power supply. The fuel is reserved in a T shape tank and diffuses through the porous diffusion layer to the catalyst at anode. The stack has a maximum power output of 110mW with 3M methanol at room temperature and output a stable power even thought 5% fuel is the remained in reservoir. Its performance decreases less than 3% for 100 hours continuous work. As such, it is believed to be more applicable for powering the wireless sensor nodes.

Dynamic 3D strain measurements with embedded micro-structured optical fiber Bragg grating sensors during impact on a CFRP coupon

NASA Astrophysics Data System (ADS)

Goossens, Sidney; Geernaert, Thomas; De Pauw, Ben; Lamberti, Alfredo; Vanlanduit, Steve; Luyckx, Geert; Chiesura, Gabriele; Thienpont, Hugo; Berghmans, Francis

2017-04-01

Composite materials are increasingly used in aerospace applications, owing to their high strength-to-mass ratio. Such materials are nevertheless vulnerable to impact damage. It is therefore important to investigate the effects of impacts on composites. Here we embed specialty microstructured optical fiber Bragg grating based sensors inside a carbon fiber reinforced polymer, providing access to the 3D strain evolution within the composite during impact. We measured a maximum strain of -655 μɛ along the direction of impact, and substantially lower values in the two in-plane directions. Such in-situ characterization can trigger insight in the development of impact damage in composites.

Time-domain fiber loop ringdown sensor and sensor network

NASA Astrophysics Data System (ADS)

Kaya, Malik

Optical fibers have been mostly used in fiber optic communications, imaging optics, sensing technology, etc. Fiber optic sensors have gained increasing attention for scientific and structural health monitoring (SHM) applications. In this study, fiber loop ringdown (FLRD) sensors were fabricated for scientific, SHM, and sensor networking applications. FLRD biosensors were fabricated for both bulk refractive index (RI)- and surface RI-based DNA sensing and one type of bacteria sensing. Furthermore, the effect of glucose oxidase (GOD) immobilization at the sensor head on sensor performance was evaluated for both glucose and synthetic urine solutions with glucose concentration between 0.1% and 10%. Detection sensitivities of the glucose sensors were achieved as low as 0.05%. For chemical sensing, heavy water, ranging from 97% to 10%, and several elemental solutions were monitored by using the FLRD chemical sensors. Bulk index-based FLRD sensing showed that trace elements can be detected in deionized water. For physical sensing, water and cracking sensors were fabricated and embedded into concrete. A partially-etched single-mode fiber (SMF) was embedded into a concrete bar for water monitoring while a bare SMF without any treatment was directly embedded into another concrete bar for monitoring cracks. Furthermore, detection sensitivities of water and crack sensors were investigated as 10 ml water and 0.5 mm surface crack width, respectively. Additionally fiber loop ringdown-fiber Bragg grating temperature sensors were developed in the laboratory; two sensor units for water, crack, and temperature sensing were deployed into a concrete cube in a US Department of Energy test bed (Miami, FL). Multi-sensor applications in a real concrete structure were accomplished by testing the six FLRD sensors. As a final stage, a sensor network was assembled by multiplexing two or three FLRD sensors in series and parallel. Additionally, two FLRD sensors were combined in series and parallel by using a 2x1 micro-electromechanical system optical switch to control sensors individually. For both configurations, contributions of each sensor to two or three coupled signals were simulated theoretically. Results show that numerous FLRD sensors can be connected in different configurations, and a sensor network can be built up for multi-function sensing applications.

IMAPS Device Packaging Conference 2017 - Engineered Micro Systems & Devices Track

NASA Technical Reports Server (NTRS)

Varnavas, Kosta

2017-01-01

NASA field center Marshall Space Flight Center (Huntsville, AL), has invested in advanced wireless sensor technology development. Developments for a wireless microcontroller back-end were primarily focused on the commercial Synapse Wireless family of devices. These devices have many useful features for NASA applications, good characteristics and the ability to be programmed Over-The-Air (OTA). The effort has focused on two widely used sensor types, mechanical strain gauges and thermal sensors. Mechanical strain gauges are used extensively in NASA structural testing and even on vehicle instrumentation systems. Additionally, thermal monitoring with many types of sensors is extensively used. These thermal sensors include thermocouples of all types, resistive temperature devices (RTDs), diodes and other thermal sensor types. The wireless thermal board will accommodate all of these types of sensor inputs to an analog front end. The analog front end on each of the sensors interfaces to the Synapse wireless microcontroller, based on the Atmel Atmega128 device. Once the analog sensor output data is digitized by the onboard analog to digital converter (A/D), the data is available for analysis, computation or transmission. Various hardware features allow custom embedded software to manage battery power to enhance battery life. This technology development fits nicely into using numerous additional sensor front ends, including some of the low-cost printed circuit board capacitive moisture content sensors currently being developed at Auburn University.

Data Exploration using Unsupervised Feature Extraction for Mixed Micro-Seismic Signals

NASA Astrophysics Data System (ADS)

Meyer, Matthias; Weber, Samuel; Beutel, Jan

2017-04-01

We present a system for the analysis of data originating in a multi-sensor and multi-year experiment focusing on slope stability and its underlying processes in fractured permafrost rock walls undertaken at 3500m a.s.l. on the Matterhorn Hörnligrat, (Zermatt, Switzerland). This system incorporates facilities for the transmission, management and storage of large-scales of data ( 7 GB/day), preprocessing and aggregation of multiple sensor types, machine-learning based automatic feature extraction for micro-seismic and acoustic emission data and interactive web-based visualization of the data. Specifically, a combination of three types of sensors are used to profile the frequency spectrum from 1 Hz to 80 kHz with the goal to identify the relevant destructive processes (e.g. micro-cracking and fracture propagation) leading to the eventual destabilization of large rock masses. The sensors installed for this profiling experiment (2 geophones, 1 accelerometers and 2 piezo-electric sensors for detecting acoustic emission), are further augmented with sensors originating from a previous activity focusing on long-term monitoring of temperature evolution and rock kinematics with the help of wireless sensor networks (crackmeters, cameras, weather station, rock temperature profiles, differential GPS) [Hasler2012]. In raw format, the data generated by the different types of sensors, specifically the micro-seismic and acoustic emission sensors, is strongly heterogeneous, in part unsynchronized and the storage and processing demand is large. Therefore, a purpose-built signal preprocessing and event-detection system is used. While the analysis of data from each individual sensor follows established methods, the application of all these sensor types in combination within a field experiment is unique. Furthermore, experience and methods from using such sensors in laboratory settings cannot be readily transferred to the mountain field site setting with its scale and full exposure to the natural environment. Consequently, many state-of-the-art algorithms for big data analysis and event classification requiring a ground truth dataset cannot be applied. The above mentioned challenges require a tool for data exploration. In the presented system, data exploration is supported by unsupervised feature learning based on convolutional neural networks, which is used to automatically extract common features for preliminary clustering and outlier detection. With this information, an interactive web-tool allows for a fast identification of interesting time segments on which segment-selective algorithms for visualization, feature extraction and statistics can be applied. The combination of manual labeling based and unsupervised feature extraction provides an event catalog for classification of different characteristic events related to internal progression of micro-crack in steep fractured bedrock permafrost. References Hasler, A., S. Gruber, and J. Beutel (2012), Kinematics of steep bedrock permafrost, J. Geophys. Res., 117, F01016, doi:10.1029/2011JF001981.

Micro- and nano-structural details of a spider's filter for substrate vibrations: relevance for low-frequency signal transmission

PubMed Central

Erko, Maxim; Younes-Metzler, Osnat; Rack, Alexander; Zaslansky, Paul; Young, Seth L.; Milliron, Garrett; Chyasnavichyus, Marius; Barth, Friedrich G.; Fratzl, Peter; Tsukruk, Vladimir; Zlotnikov, Igor; Politi, Yael

2015-01-01

The metatarsal lyriform organ of the Central American wandering spider Cupiennius salei is its most sensitive vibration detector. It is able to sense a wide range of vibration stimuli over four orders of magnitude in frequency between at least as low as 0.1 Hz and several kilohertz. Transmission of the vibrations to the slit organ is controlled by a cuticular pad in front of it. While the mechanism of high-frequency stimulus transfer (above ca 40 Hz) is well understood and related to the viscoelastic properties of the pad's epicuticle, it is not yet clear how low-frequency stimuli (less than 40 Hz) are transmitted. Here, we study how the pad material affects the pad's mechanical properties and thus its role in the transfer of the stimulus, using a variety of experimental techniques, such as X-ray micro-computed tomography for three-dimensional imaging, X-ray scattering for structural analysis, and atomic force microscopy and scanning electron microscopy for surface imaging. The mechanical properties were investigated using scanning acoustic microscopy and nanoindentation. We show that large tarsal deflections cause large deformation in the distal highly hydrated part of the pad. Beyond this region, a sclerotized region serves as a supporting frame which resists the deformation and is displaced to push against the slits, with displacement values considerably scaled down to only a few micrometres. Unravelling the structural arrangement in such specialized structures may provide conceptual ideas for the design of new materials capable of controlling a technical sensor's specificity and selectivity, which is so typical of biological sensors. PMID:25631567

Micro- and nano-structural details of a spider's filter for substrate vibrations: relevance for low-frequency signal transmission.

PubMed

Erko, Maxim; Younes-Metzler, Osnat; Rack, Alexander; Zaslansky, Paul; Young, Seth L; Milliron, Garrett; Chyasnavichyus, Marius; Barth, Friedrich G; Fratzl, Peter; Tsukruk, Vladimir; Zlotnikov, Igor; Politi, Yael

2015-03-06

The metatarsal lyriform organ of the Central American wandering spider Cupiennius salei is its most sensitive vibration detector. It is able to sense a wide range of vibration stimuli over four orders of magnitude in frequency between at least as low as 0.1 Hz and several kilohertz. Transmission of the vibrations to the slit organ is controlled by a cuticular pad in front of it. While the mechanism of high-frequency stimulus transfer (above ca 40 Hz) is well understood and related to the viscoelastic properties of the pad's epicuticle, it is not yet clear how low-frequency stimuli (less than 40 Hz) are transmitted. Here, we study how the pad material affects the pad's mechanical properties and thus its role in the transfer of the stimulus, using a variety of experimental techniques, such as X-ray micro-computed tomography for three-dimensional imaging, X-ray scattering for structural analysis, and atomic force microscopy and scanning electron microscopy for surface imaging. The mechanical properties were investigated using scanning acoustic microscopy and nanoindentation. We show that large tarsal deflections cause large deformation in the distal highly hydrated part of the pad. Beyond this region, a sclerotized region serves as a supporting frame which resists the deformation and is displaced to push against the slits, with displacement values considerably scaled down to only a few micrometres. Unravelling the structural arrangement in such specialized structures may provide conceptual ideas for the design of new materials capable of controlling a technical sensor's specificity and selectivity, which is so typical of biological sensors.

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements, volume II

DOT National Transportation Integrated Search

2016-08-01

This two-pronged study evaluated the performance of commercial off-the-shelf (COTS) micro-electromechanical sensors and systems (MEMS) embedded in concrete pavement (Final Report Volume I) and developed a wireless MEMS multifunctional sensor system f...

Visualization and Analysis of Wireless Sensor Network Data for Smart Civil Structure Applications Based On Spatial Correlation Technique

NASA Astrophysics Data System (ADS)

Chowdhry, Bhawani Shankar; White, Neil M.; Jeswani, Jai Kumar; Dayo, Khalil; Rathi, Manorma

2009-07-01

Disasters affecting infrastructure, such as the 2001 earthquakes in India, 2005 in Pakistan, 2008 in China and the 2004 tsunami in Asia, provide a common need for intelligent buildings and smart civil structures. Now, imagine massive reductions in time to get the infrastructure working again, realtime information on damage to buildings, massive reductions in cost and time to certify that structures are undamaged and can still be operated, reductions in the number of structures to be rebuilt (if they are known not to be damaged). Achieving these ideas would lead to huge, quantifiable, long-term savings to government and industry. Wireless sensor networks (WSNs) can be deployed in buildings to make any civil structure both smart and intelligent. WSNs have recently gained much attention in both public and research communities because they are expected to bring a new paradigm to the interaction between humans, environment, and machines. This paper presents the deployment of WSN nodes in the Top Quality Centralized Instrumentation Centre (TQCIC). We created an ad hoc networking application to collect real-time data sensed from the nodes that were randomly distributed throughout the building. If the sensors are relocated, then the application automatically reconfigures itself in the light of the new routing topology. WSNs are event-based systems that rely on the collective effort of several micro-sensor nodes, which are continuously observing a physical phenomenon. WSN applications require spatially dense sensor deployment in order to achieve satisfactory coverage. The degree of spatial correlation increases with the decreasing inter-node separation. Energy consumption is reduced dramatically by having only those sensor nodes with unique readings transmit their data. We report on an algorithm based on a spatial correlation technique that assures high QoS (in terms of SNR) of the network as well as proper utilization of energy, by suppressing redundant data transmission. The visualization and analysis of WSN data are presented in a Windows-based user interface.

The Electrophysiological Biosensor for Batch-Measurement of Cell Signals

NASA Astrophysics Data System (ADS)

Suzuki, Kengo; Tanabe, Masato; Ezaki, Takahiro; Konishi, Satoshi; Oka, Hiroaki; Ozaki, Nobuhiko

This paper presents the development of electrophysiological biosensor. The developed sensor allows a batch-measurement by detecting all signals from a large number of cells together. The developed sensor employs the same measurement principle as the patch-clamp technique. A single cell is sucked and clamped in a micro hole with detecting electrode. Detecting electrodes in arrayed micro holes are connected together for the batch-measurement of signals a large number of cell signals. Furthermore, an array of sensors for batch-measurement is designed to improve measurement-throughput to satisfy requirements for the drug screening application.

Micro optical sensor systems for sunsensing applications

NASA Astrophysics Data System (ADS)

Leijtens, Johan; de Boom, Kees

2017-11-01

Optimum application of micro system technologies allows building small sensor systems that will alter procurement strategies for spacecraft manufacturers. One example is the decreased size and cost for state of the art sunsensors. Integrated sensor systems are being designed which, through use of microsystem technology, are an order of magnitutde smaller than most current sunsensors and which hold due to the large reproducibility through batch manufacturing the promise of drastic price reduction. If the Commercial Of The Shelf (COTS) approach is adopted by satellite manufacturers, this will drastically decrease mass and cost budgets associated with sunsensing applications.

Micro-optoelectromechanical systems accelerometer based on intensity modulation using a one-dimensional photonic crystal.

PubMed

Sheikhaleh, Arash; Abedi, Kambiz; Jafari, Kian; Gholamzadeh, Reza

2016-11-10

In this paper, we propose what we believe is a novel sensitive micro-optoelectromechanical systems (MOEMS) accelerometer based on intensity modulation by using a one-dimensional photonic crystal. The optical sensing system of the proposed structure includes an air-dielectric multilayer photonic bandgap material, a laser diode (LD) light source, a typical photodiode (1550 nm) and a set of integrated optical waveguides. The proposed sensor provides several advantages, such as a relatively wide measurement range, good linearity in the whole measurement range, integration capability, negligible cross-axis sensitivity, high reliability, and low air-damping coefficient, which results in a wider frequency bandwidth for a fixed resonance frequency. Simulation results show that the functional characteristics of the sensor are as follows: a mechanical sensitivity of 119.21 nm/g, a linear measurement range of ±38g and a resonance frequency of 1444 Hz. Thanks to the above-mentioned characteristics, the proposed MOEMS accelerometer is suitable for a wide spectrum of applications, ranging from consumer electronics to aerospace and inertial navigation.

Micro-/nanoscale multi-field coupling in nonlinear photonic devices

NASA Astrophysics Data System (ADS)

Yang, Qing; Wang, Yubo; Tang, Mingwei; Xu, Pengfei; Xu, Yingke; Liu, Xu

2017-08-01

The coupling of mechanics/electronics/photonics may improve the performance of nanophotonic devices not only in the linear region but also in the nonlinear region. This review letter mainly presents the recent advances on multi-field coupling in nonlinear photonic devices. The nonlinear piezoelectric effect and piezo-phototronic effects in quantum wells and fibers show that large second-order nonlinear susceptibilities can be achieved, and second harmonic generation and electro-optic modulation can be enhanced and modulated. Strain engineering can tune the lattice structures and induce second order susceptibilities in central symmetry semiconductors. By combining the absorption-based photoacoustic effect and intensity-dependent photobleaching effect, subdiffraction imaging can be achieved. This review will also discuss possible future applications of these novel effects and the perspective of their research. The review can help us develop a deeper knowledge of the substance of photon-electron-phonon interaction in a micro-/nano- system. Moreover, it can benefit the design of nonlinear optical sensors and imaging devices with a faster response rate, higher efficiency, more sensitivity and higher spatial resolution which could be applied in environmental detection, bio-sensors, medical imaging and so on.

Biomineralized 3-D Nanoparticle Assemblies with Micro-to-Nanoscale Features and Tailored Chemistries

DTIC Science & Technology

2008-01-07

protuberances on the pollen surface were well preserved after conversion. This hybrid approach may be applied to a variety of bio-organic templates, which are...replicas were found to be rapid, low voltage, minimally-invasive sensors of NO(g) and to exhibit photoluminescence . The kinetics of magnesiothermic...silica- organic hybrid structures via biomimetic silicification has been demonstrated. The effects of two key parameters, the polyamine content and

Multiocular image sensor with on-chip beam-splitter and inner meta-micro-lens for single-main-lens stereo camera.

PubMed

Koyama, Shinzo; Onozawa, Kazutoshi; Tanaka, Keisuke; Saito, Shigeru; Kourkouss, Sahim Mohamed; Kato, Yoshihisa

2016-08-08

We developed multiocular 1/3-inch 2.75-μm-pixel-size 2.1M- pixel image sensors by co-design of both on-chip beam-splitter and 100-nm-width 800-nm-depth patterned inner meta-micro-lens for single-main-lens stereo camera systems. A camera with the multiocular image sensor can capture horizontally one-dimensional light filed by both the on-chip beam-splitter horizontally dividing ray according to incident angle, and the inner meta-micro-lens collecting the divided ray into pixel with small optical loss. Cross-talks between adjacent light field images of a fabricated binocular image sensor and of a quad-ocular image sensor are as low as 6% and 7% respectively. With the selection of two images from one-dimensional light filed images, a selective baseline for stereo vision is realized to view close objects with single-main-lens. In addition, by adding multiple light field images with different ratios, baseline distance can be tuned within an aperture of a main lens. We suggest the electrically selective or tunable baseline stereo vision to reduce 3D fatigue of viewers.

Vertically aligned P(VDF-TrFE) core-shell structures on flexible pillar arrays

PubMed Central

Choi, Yoon-Young; Yun, Tae Gwang; Qaiser, Nadeem; Paik, Haemin; Roh, Hee Seok; Hong, Jongin; Hong, Seungbum; Han, Seung Min; No, Kwangsoo

2015-01-01

PVDF and P(VDF-TrFE) nano- and micro- structures have been widely used due to their potential applications in several fields, including sensors, actuators, vital sign transducers, and energy harvesters. In this study, we developed vertically aligned P(VDF-TrFE) core-shell structures using high modulus polyurethane acrylate (PUA) pillars as the support structure to maintain the structural integrity. In addition, we were able to improve the piezoelectric effect by 1.85 times from 40 ± 2 to 74 ± 2 pm/V when compared to the thin film counterpart, which contributes to the more efficient current generation under a given stress, by making an effective use of the P(VDF-TrFE) thin top layer as well as the side walls. We attribute the enhancement of piezoelectric effects to the contributions from the shell component and the strain confinement effect, which was supported by our modeling results. We envision that these organic-based P(VDF-TrFE) core-shell structures will be used widely as 3D sensors and power generators because they are optimized for current generations by utilizing all surface areas, including the side walls of core-shell structures. PMID:26040539

Vertically aligned P(VDF-TrFE) core-shell structures on flexible pillar arrays

DOE PAGES

Choi, Yoon-Young; Yun, Tae Gwang; Qaiser, Nadeem; ...

2015-06-04

PVDF and P(VDF-TrFE) nano- and micro- structures are widely used due to their potential applications in several fields, including sensors, actuators, vital sign transducers, and energy harvesters. In this study, we developed vertically aligned P(VDF-TrFE) core-shell structures using high modulus polyurethane acrylate (PUA) pillars as the support structure to maintain the structural integrity. In addition, we were able to improve the piezoelectric effect by 1.85 times from 40 ± 2 to 74 ± 2 pm/V when compared to the thin film counterpart, which contributes to the more efficient current generation under a given stress, by making an effective use ofmore » the P(VDF-TrFE) thin top layer as well as the side walls. We attribute the enhancement of piezoelectric effects to the contributions from the shell component and the strain confinement effect, which was supported by our modeling results. We envision that these organic-based P(VDF-TrFE) core-shell structures will be used widely as 3D sensors and power generators because they are optimized for current generations by utilizing all surface areas, including the side walls of core-shell structures.« less

Integrated bio-fluorescence sensor.

PubMed

Thrush, Evan; Levi, Ofer; Ha, Wonill; Wang, Ke; Smith, Stephen J; Harris, James S

2003-09-26

Due to the recent explosion in optoelectronics for telecommunication applications, novel optoelectronic sensing structures can now be realized. In this work, we explore the integration of optoelectronic components towards miniature and portable fluorescence sensors. The integration of these micro-fabricated sensors with microfluidics and capillary networks may reduce the cost and complexity of current research instruments and open up a world of new applications in portable biological analysis systems. A novel optoelectronic design that capitalizes on current vertical-cavity surface-emitting laser (VCSEL) technology is explored. Specifically, VCSELs, optical emission filters and PIN photodetectors are fabricated as part of a monolithically integrated near-infrared fluorescence detection system. High-performance lasers and photodetectors have been characterized and integrated to form a complete sensor. Experimental results show that sensor sensitivity is limited by laser background. The laser background is caused by spontaneous emission emitted from the side of the VCSEL excitation source. Laser background will limit sensitivity in most integrated sensing designs due to locating excitation sources and photodetectors in such close proximity, and methods are proposed to reduce the laser background in such designs so that practical fluorescent detection limits can be achieved.

Pushbroom Hyperspectral Imaging from AN Unmanned Aircraft System (uas) - Geometric Processingworkflow and Accuracy Assessment

NASA Astrophysics Data System (ADS)

Turner, D.; Lucieer, A.; McCabe, M.; Parkes, S.; Clarke, I.

2017-08-01

In this study, we assess two push broom hyperspectral sensors as carried by small (10-15 kg) multi-rotor Unmanned Aircraft Systems (UAS). We used a Headwall Photonics micro-Hyperspec push broom sensor with 324 spectral bands (4-5 nm FWHM) and a Headwall Photonics nano-Hyperspec sensor with 270 spectral bands (6 nm FWHM) both in the VNIR spectral range (400-1000 nm). A gimbal was used to stabilise the sensors in relation to the aircraft flight dynamics, and for the micro-Hyperspec a tightly coupled dual frequency Global Navigation Satellite System (GNSS) receiver, an Inertial Measurement Unit (IMU), and Machine Vision Camera (MVC) were used for attitude and position determination. For the nano-Hyperspec, a navigation grade GNSS system and IMU provided position and attitude data. This study presents the geometric results of one flight over a grass oval on which a dense Ground Control Point (GCP) network was deployed. The aim being to ascertain the geometric accuracy achievable with the system. Using the PARGE software package (ReSe - Remote Sensing Applications) we ortho-rectify the push broom hyperspectral image strips and then quantify the accuracy of the ortho-rectification by using the GCPs as check points. The orientation (roll, pitch, and yaw) of the sensor is measured by the IMU. Alternatively imagery from a MVC running at 15 Hz, with accurate camera position data can be processed with Structure from Motion (SfM) software to obtain an estimated camera orientation. In this study, we look at which of these data sources will yield a flight strip with the highest geometric accuracy.

Mace-like gold hollow hierarchical micro/nanostructures fabricated by co-effect of catalytic etching and electrodeposition and their SERS performance

NASA Astrophysics Data System (ADS)

Zhang, Haibao; Wang, Jingjing; Wang, Hua; Tian, Xingyou

2017-09-01

In this paper, we presented the fabrication of mace-like gold hollow hierarchical micro/nanostructures (HMNs) grafted on ZnO nanorods array by using an electrochemical deposition in chloroauric acid solution on gold layer pre-coated ZnO nanorods array. Different from general electrochemical deposition process, the catalytic etching to ZnO and electrodeposition of gold are co-existed in our case, which lead to an inner hollow structure and an outer gold shell. Due to the appropriate electrodeposition conditions, the outer gold shell was built of many wimble-like nanoparticles, and the hierarchical micro/nanostructures were thus formed. In addition, because of the deposition rate is decreased gradually away from the top of ZnO nanorods, the final structures show mace-like appearance. The surface-enhanced Raman scattering (SERS) effect of the as-prepared gold hollow HMNs was further studied by using rhodamine 6G as probe molecule. It is demonstrated that these structures show ultrahigh SERS activity, and the detecting low limit of R6G solution can be to 10-10 M on single mace-like gold HMNs, which is quite important for their potential application in SERS-based surface analysis and sensors.

A Wireless MEMS-Based Inclinometer Sensor Node for Structural Health Monitoring

PubMed Central

Ha, Dae Woong; Park, Hyo Seon; Choi, Se Woon; Kim, Yousok

2013-01-01

This paper proposes a wireless inclinometer sensor node for structural health monitoring (SHM) that can be applied to civil engineering and building structures subjected to various loadings. The inclinometer used in this study employs a method for calculating the tilt based on the difference between the static acceleration and the acceleration due to gravity, using a micro-electro-mechanical system (MEMS)-based accelerometer. A wireless sensor node was developed through which tilt measurement data are wirelessly transmitted to a monitoring server. This node consists of a slave node that uses a short-distance wireless communication system (RF 2.4 GHz) and a master node that uses a long-distance telecommunication system (code division multiple access—CDMA). The communication distance limitation, which is recognized as an important issue in wireless monitoring systems, has been resolved via these two wireless communication components. The reliability of the proposed wireless inclinometer sensor node was verified experimentally by comparing the values measured by the inclinometer and subsequently transferred to the monitoring server via wired and wireless transfer methods to permit a performance evaluation of the wireless communication sensor nodes. The experimental results indicated that the two systems (wired and wireless transfer systems) yielded almost identical values at a tilt angle greater than 1°, and a uniform difference was observed at a tilt angle less than 0.42° (approximately 0.0032° corresponding to 0.76% of the tilt angle, 0.42°) regardless of the tilt size. This result was deemed to be within the allowable range of measurement error in SHM. Thus, the wireless transfer system proposed in this study was experimentally verified for practical application in a structural health monitoring system. PMID:24287533

Giant magnetoresistive sensor

DOEpatents

Stearns, Daniel G.; Vernon, Stephen P.; Ceglio, Natale M.; Hawryluk, Andrew M.

1999-01-01

A magnetoresistive sensor element with a three-dimensional micro-architecture is capable of significantly improved sensitivity and highly localized measurement of magnetic fields. The sensor is formed of a multilayer film of alternately magnetic and nonmagnetic materials. The sensor is optimally operated in a current perpendicular to plane mode. The sensor is useful in magnetic read/write heads, for high density magnetic information storage and retrieval.

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems

PubMed Central

Helwig, Andreas; Hackner, Angelika; Zappa, Dario; Sberveglieri, Giorgio

2018-01-01

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R0, and under gas exposure, Rgas, to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response Resp=(R0−Rgas)/R0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors. PMID:29401673

A real-time 3D range image sensor based on a novel tip-tilt-piston micromirror and dual frequency phase shifting

NASA Astrophysics Data System (ADS)

Skotheim, Øystein; Schumann-Olsen, Henrik; Thorstensen, Jostein; Kim, Anna N.; Lacolle, Matthieu; Haugholt, Karl-Henrik; Bakke, Thor

2015-03-01

Structured light is a robust and accurate method for 3D range imaging in which one or more light patterns are projected onto the scene and observed with an off-axis camera. Commercial sensors typically utilize DMD- or LCD-based LED projectors, which produce good results but have a number of drawbacks, e.g. limited speed, limited depth of focus, large sensitivity to ambient light and somewhat low light efficiency. We present a 3D imaging system based on a laser light source and a novel tip-tilt-piston micro-mirror. Optical interference is utilized to create sinusoidal fringe patterns. The setup allows fast and easy control of both the frequency and the phase of the fringe patterns by altering the axes of the micro-mirror. For 3D reconstruction we have adapted a Dual Frequency Phase Shifting method which gives robust range measurements with sub-millimeter accuracy. The use of interference for generating sine patterns provides high light efficiency and good focusing properties. The use of a laser and a bandpass filter allows easy removal of ambient light. The fast response of the micro-mirror in combination with a high-speed camera and real-time processing on the GPU allows highly accurate 3D range image acquisition at video rates.

Through Wall Radar Classification of Human Micro-Doppler Using Singular Value Decomposition Analysis

PubMed Central

Ritchie, Matthew; Ash, Matthew; Chen, Qingchao; Chetty, Kevin

2016-01-01

The ability to detect the presence as well as classify the activities of individuals behind visually obscuring structures is of significant benefit to police, security and emergency services in many situations. This paper presents the analysis from a series of experimental results generated using a through-the-wall (TTW) Frequency Modulated Continuous Wave (FMCW) C-Band radar system named Soprano. The objective of this analysis was to classify whether an individual was carrying an item in both hands or not using micro-Doppler information from a FMCW sensor. The radar was deployed at a standoff distance, of approximately 0.5 m, outside a residential building and used to detect multiple people walking within a room. Through the application of digital filtering, it was shown that significant suppression of the primary wall reflection is possible, significantly enhancing the target signal to clutter ratio. Singular Value Decomposition (SVD) signal processing techniques were then applied to the micro-Doppler signatures from different individuals. Features from the SVD information have been used to classify whether the person was carrying an item or walking free handed. Excellent performance of the classifier was achieved in this challenging scenario with accuracies up to 94%, suggesting that future through wall radar sensors may have the ability to reliably recognize many different types of activities in TTW scenarios using these techniques. PMID:27589760

Through Wall Radar Classification of Human Micro-Doppler Using Singular Value Decomposition Analysis.

PubMed

Ritchie, Matthew; Ash, Matthew; Chen, Qingchao; Chetty, Kevin

2016-08-31

The ability to detect the presence as well as classify the activities of individuals behind visually obscuring structures is of significant benefit to police, security and emergency services in many situations. This paper presents the analysis from a series of experimental results generated using a through-the-wall (TTW) Frequency Modulated Continuous Wave (FMCW) C-Band radar system named Soprano. The objective of this analysis was to classify whether an individual was carrying an item in both hands or not using micro-Doppler information from a FMCW sensor. The radar was deployed at a standoff distance, of approximately 0.5 m, outside a residential building and used to detect multiple people walking within a room. Through the application of digital filtering, it was shown that significant suppression of the primary wall reflection is possible, significantly enhancing the target signal to clutter ratio. Singular Value Decomposition (SVD) signal processing techniques were then applied to the micro-Doppler signatures from different individuals. Features from the SVD information have been used to classify whether the person was carrying an item or walking free handed. Excellent performance of the classifier was achieved in this challenging scenario with accuracies up to 94%, suggesting that future through wall radar sensors may have the ability to reliably recognize many different types of activities in TTW scenarios using these techniques.

Optical printed circuit board (O-PCB) and VLSI photonic integrated circuits: visions, challenges, and progresses

NASA Astrophysics Data System (ADS)

Lee, El-Hang; Lee, S. G.; O, B. H.; Park, S. G.; Noh, H. S.; Kim, K. H.; Song, S. H.

2006-09-01

A collective overview and review is presented on the original work conducted on the theory, design, fabrication, and in-tegration of micro/nano-scale optical wires and photonic devices for applications in a newly-conceived photonic systems called "optical printed circuit board" (O-PCBs) and "VLSI photonic integrated circuits" (VLSI-PIC). These are aimed for compact, high-speed, multi-functional, intelligent, light-weight, low-energy and environmentally friendly, low-cost, and high-volume applications to complement or surpass the capabilities of electrical PCBs (E-PCBs) and/or VLSI electronic integrated circuit (VLSI-IC) systems. These consist of 2-dimensional or 3-dimensional planar arrays of micro/nano-optical wires and circuits to perform the functions of all-optical sensing, storing, transporting, processing, switching, routing and distributing optical signals on flat modular boards or substrates. The integrated optical devices include micro/nano-scale waveguides, lasers, detectors, switches, sensors, directional couplers, multi-mode interference devices, ring-resonators, photonic crystal devices, plasmonic devices, and quantum devices, made of polymer, silicon and other semiconductor materials. For VLSI photonic integration, photonic crystals and plasmonic structures have been used. Scientific and technological issues concerning the processes of miniaturization, interconnection and integration of these systems as applicable to board-to-board, chip-to-chip, and intra-chip integration, are discussed along with applications for future computers, telecommunications, and sensor-systems. Visions and challenges toward these goals are also discussed.

Studying the Effect of Deposition Conditions on the Performance and Reliability of MEMS Gas Sensors

PubMed Central

Sadek, Khaled; Moussa, Walied

2007-01-01

In this paper, the reliability of a micro-electro-mechanical system (MEMS)-based gas sensor has been investigated using Three Dimensional (3D) coupled multiphysics Finite Element (FE) analysis. The coupled field analysis involved a two-way sequential electrothermal fields coupling and a one-way sequential thermal-structural fields coupling. An automated substructuring code was developed to reduce the computational cost involved in simulating this complicated coupled multiphysics FE analysis by up to 76 percent. The substructured multiphysics model was then used to conduct a parametric study of the MEMS-based gas sensor performance in response to the variations expected in the thermal and mechanical characteristics of thin films layers composing the sensing MEMS device generated at various stages of the microfabrication process. Whenever possible, the appropriate deposition variables were correlated in the current work to the design parameters, with good accuracy, for optimum operation conditions of the gas sensor. This is used to establish a set of design rules, using linear and nonlinear empirical relations, which can be utilized in real-time at the design and development decision-making stages of similar gas sensors to enable the microfabrication of these sensors with reliable operation.

Slot Antenna Integrated Re-Entrant Resonator Based Wireless Pressure Sensor for High-Temperature Applications.

PubMed

Su, Shujing; Lu, Fei; Wu, Guozhu; Wu, Dezhi; Tan, Qiulin; Dong, Helei; Xiong, Jijun

2017-08-25

The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 °C to 800 °C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz/kPa.

Two-axis direct fluid shear stress sensor

NASA Technical Reports Server (NTRS)

Bajikar, Sateesh (Inventor); Scott, Michael A. (Inventor); Adcock, Edward E. (Inventor)

2011-01-01

A micro sized multi-axis semiconductor skin friction/wall shear stress induced by fluid flow. The sensor design includes a shear/strain transduction gimble connected to a force collecting plate located at the flow boundary surface. The shear force collecting plate is interconnected by an arm to offset the tortional hinges from the fluid flow. The arm is connected to the shear force collecting plate through dual axis torsional hinges with piezoresistive torsional strain gauges. These gauges are disposed on the tortional hinges and provide a voltage output indicative of applied shear stress acting on the force collection plate proximate the flow boundary surface. Offsetting the torsional hinges creates a force concentration and resolution structure that enables the generation of a large stress on the strain gauge from small shear stress, or small displacement of the collecting plate. The design also isolates the torsional sensors from exposure to the fluid flow.

Robust design of an inkjet-printed capacitive sensor for position tracking of a MOEMS-mirror in a Michelson interferometer setup

NASA Astrophysics Data System (ADS)

Faller, Lisa-Marie; Zangl, Hubert

2017-05-01

To guarantee high performance of Micro Optical Electro Mechanical Systems (MOEMS), precise position feedback is crucial. To overcome drawbacks of widely used optical feedback, we propose an inkjet-printed capacitive position sensor as smart packaging solution. Printing processes suffer from tolerances in excess of those from standard processes. Thus, FEM simulations covering assumed tolerances of the system are adopted. These simulations are structured following a Design Of Computer Experiments (DOCE) and are then employed to determine a optimal sensor design. Based on the simulation results, statistical models are adopted for the dynamic system. These models are to be used together with specifically designed hardware, considered to cope with challenging requirements of ≍50nm position accuracy at 10MS/s with 1000μm measurement range. Noise analysis is performed considering the influence of uncertainties to assess resolution and bandwidth capabilities.

Research on Flow Field Perception Based on Artificial Lateral Line Sensor System

PubMed Central

Wang, Anyi; Wang, Shirui; Yang, Tingting

2018-01-01

In nature, the lateral line of fish is a peculiar and important organ for sensing the surrounding hydrodynamic environment, preying, escaping from predators and schooling. In this paper, by imitating the mechanism of fish lateral canal neuromasts, we developed an artificial lateral line system composed of micro-pressure sensors. Through hydrodynamic simulations, an optimized sensor structure was obtained and the pressure distribution models of the lateral surface were established in uniform flow and turbulent flow. Carrying out the corresponding underwater experiment, the validity of the numerical simulation method is verified by the comparison between the experimental data and the simulation results. In addition, a variety of effective research methods are proposed and validated for the flow velocity estimation and attitude perception in turbulent flow, respectively and the shape recognition of obstacles is realized by the neural network algorithm. PMID:29534499

High granularity tracker based on a Triple-GEM optically read by a CMOS-based camera

NASA Astrophysics Data System (ADS)

Marafini, M.; Patera, V.; Pinci, D.; Sarti, A.; Sciubba, A.; Spiriti, E.

2015-12-01

The detection of photons produced during the avalanche development in gas chambers has been the subject of detailed studies in the past. The great progresses achieved in last years in the performance of micro-pattern gas detectors on one side and of photo-sensors on the other provide the possibility of making high granularity and very sensitive particle trackers. In this paper, the results obtained with a triple-GEM structure read-out by a CMOS based sensor are described. The use of an He/CF4 (60/40) gas mixture and a detailed optimization of the electric fields made possible to obtain a very high GEM light yield. About 80 photons per primary electron were detected by the sensor resulting in a very good capability of tracking both muons from cosmic rays and electrons from natural radioactivity.

Study on the Correlation between Humidity and Material Strains in Separable Micro Humidity Sensor Design

PubMed Central

Chang, Chih-Yuan

2017-01-01

Incidents of injuries caused by tiles falling from building exterior walls are frequently reported in Taiwan. Humidity is an influential factor in tile deterioration but it is more difficult to measure the humidity inside a building structure than the humidity in an indoor environment. Therefore, a separable microsensor was developed in this study to measure the humidity of the cement mortar layer with a thickness of 1.5–2 cm inside the external wall of a building. 3D printing technology is used to produce an encapsulation box that can protect the sensor from damage caused by the concrete and cement mortar. The sensor is proven in this study to be capable of measuring temperature and humidity simultaneously and the measurement results are then used to analyze the influence of humidity on external wall tile deterioration. PMID:28481300

The MITy micro-rover: Sensing, control, and operation

NASA Technical Reports Server (NTRS)

Malafeew, Eric; Kaliardos, William

1994-01-01

The sensory, control, and operation systems of the 'MITy' Mars micro-rover are discussed. It is shown that the customized sun tracker and laser rangefinder provide internal, autonomous dead reckoning and hazard detection in unstructured environments. The micro-rover consists of three articulated platforms with sensing, processing and payload subsystems connected by a dual spring suspension system. A reactive obstacle avoidance routine makes intelligent use of robot-centered laser information to maneuver through cluttered environments. The hazard sensors include a rangefinder, inclinometers, proximity sensors and collision sensors. A 486/66 laptop computer runs the graphical user interface and programming environment. A graphical window displays robot telemetry in real time and a small TV/VCR is used for real time supervisory control. Guidance, navigation, and control routines work in conjunction with the mapping and obstacle avoidance functions to provide heading and speed commands that maneuver the robot around obstacles and towards the target.

Vibration condition measure instrument of motor using MEMS accelerometer

NASA Astrophysics Data System (ADS)

Chen, Jun

2018-04-01

In this work, a novel vibration condition measure instrument of motor using a digital micro accelerometer is proposed. In order to reduce the random noise found in the data, the sensor modeling is established and also the Kalman filter (KMF) is developed. According to these data from KMF, the maximum vibration displacement is calculated by the integration algorithm with the DC bias removed. The high performance micro controller unit (MCU) is used in the implementation of controller. By the IIC digital interface port, the data are transmitted from sensor to controller. The hardware circuits of the sensor and micro controller are designed and tested. With the computational formula of maximum displacement and FFT, the high precession results of displacement and frequency are gotten. Finally, the paper presents various experimental results to prove that this instrument is suitable for application in electrical motor vibration measurement.

Polymer microfiber bridging Bi-tapered refractive index sensor based on evanescent field

NASA Astrophysics Data System (ADS)

Lv, Ri-Qing; Wang, Qi; Wang, Bo-Tao; Liu, Yu; Kong, Lingxin

2018-05-01

A PDMS/graphene enhanced PMMA micro optical waveguide sensor is reported in terms of fabrication method and optical characteristics. The micro optical waveguide with a diameter of 6 μm and a length of 800 μm is used as the sensing probe to realize refractive index (RI) measurement suspended in NaCl solutions with different concentrations. Experimental results show that the refractive index sensing sensitivity can reach 2027.97 nm/RIU within the refractive index ranging from 1.3333-1.3426. Research results show that PMMA/graphene micro optical waveguide doped with PDMS is an excellent high sensitive sensing technology in refractive index detection field.

Use of multi-functional flexible micro-sensors for in situ measurement of temperature, voltage and fuel flow in a proton exchange membrane fuel cell.

PubMed

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased.

Femtosecond Laser Ablated FBG with Composite Microstructure for Hydrogen Sensor Application.

PubMed

Zou, Meng; Dai, Yutang; Zhou, Xian; Dong, Ke; Yang, Minghong

2016-12-01

A composite microstructure in fiber Bragg grating (FBG) with film deposition for hydrogen detection is presented. Through ablated to FBG cladding by a femtosecond laser, straight-trenches and spiral micro-pits are formed. A Pd-Ag film is sputtered on the surface of the laser processed FBG single mode fiber, and acts as hydrogen sensing transducer. The demonstrated experimental outcomes show that a composite structure produced the highest sensitivity of 26.3 pm/%H, nearly sevenfold more sensitive compared with original standard FBG. It offers great potential in engineering applications for its good structure stability and sensitivity.

Monolithic carbon structures including suspended single nanowires and nanomeshes as a sensor platform

PubMed Central

2013-01-01

With the development of nanomaterial-based nanodevices, it became inevitable to develop cost-effective and simple nanofabrication technologies enabling the formation of nanomaterial assembly in a controllable manner. Herein, we present suspended monolithic carbon single nanowires and nanomeshes bridging two bulk carbon posts, fabricated in a designed manner using two successive UV exposure steps and a single pyrolysis step. The pyrolysis step is accompanied with a significant volume reduction, resulting in the shrinkage of micro-sized photoresist structures into nanoscale carbon structures. Even with the significant elongation of the suspended carbon nanowire induced by the volume reduction of the bulk carbon posts, the resultant tensional stress along the nanowire is not significant but grows along the wire thickness; this tensional stress gradient and the bent supports of the bridge-like carbon nanowire enhance structural robustness and alleviate the stiction problem that suspended nanostructures frequently experience. The feasibility of the suspended carbon nanostructures as a sensor platform was demonstrated by testing its electrochemical behavior, conductivity-temperature relationship, and hydrogen gas sensing capability. PMID:24256942

A Self-Powered and Autonomous Fringing Field Capacitive Sensor Integrated into a Micro Sprinkler Spinner to Measure Soil Water Content.

PubMed

da Costa, Eduardo Ferreira; de Oliveira, Nestor E; Morais, Flávio J O; Carvalhaes-Dias, Pedro; Duarte, Luis Fernando C; Cabot, Andreu; Siqueira Dias, J A

2017-03-12

We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor's capacitance (measured in a laboratory prototype) increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S = 15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θ v sensor's root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit) is less than 1.5 μ A, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested.

Investigation of Very Fast Light Detectors: Silicon Photomultiplier and Micro PMT for a Cosmic Ray Array

NASA Astrophysics Data System (ADS)

Cervantes, Omar; Reyes, Liliana; Hooks, Tyler; Perez, Luis; Ritt, Stefan

2016-03-01

To construct a cosmic detector array using 4 scintillation detectors, we investigated 2 recent light sensor technologies from Hamamatsu, as possible readout detectors. First, we investigated several homemade versions of the multipixel photon counter (MPPC) light sensors. These detectors were either biased with internal or external high voltage power supplies. We made extensive measurements to confirm for the coincidence of the MPPC devices. Each sensor is coupled to a wavelength shifting fiber (WSF) that is embedded along a plastic scintillator sheet (30cmx60cmx1/4''). Using energetic cosmic rays, we evaluated several of these homemade detector modules placed above one another in a light proof enclosure. Next, we assembled 2 miniaturized micro photomultiplier (micro PMT), a device recently marketed by Hamamatsu. These sensors showed very fast response times. With 3 WSF embedded in scintillator sheets, we performed coincidence experiments. The detector waveforms were captured using the 5GS/sec domino ring sampler, the DRS4 and our workflow using the CERN PAW package and data analysis results would be presented. Title V Grant.

Detailed studies of full-size ATLAS12 sensors

NASA Astrophysics Data System (ADS)

Hommels, L. B. A.; Allport, P. P.; Baca, M.; Broughton, J.; Chisholm, A.; Nikolopoulos, K.; Pyatt, S.; Thomas, J. P.; Wilson, J. A.; Kierstead, J.; Kuczewski, P.; Lynn, D.; Arratia, M.; Klein, C. T.; Ullan, M.; Fleta, C.; Fernandez-Tejero, J.; Bloch, I.; Gregor, I. M.; Lohwasser, K.; Poley, L.; Tackmann, K.; Trofimov, A.; Yildirim, E.; Hauser, M.; Jakobs, K.; Kuehn, S.; Mahboubi, K.; Mori, R.; Parzefall, U.; Clark, A.; Ferrere, D.; Gonzalez Sevilla, S.; Ashby, J.; Blue, A.; Bates, R.; Buttar, C.; Doherty, F.; McMullen, T.; McEwan, F.; O`Shea, V.; Kamada, S.; Yamamura, K.; Ikegami, Y.; Nakamura, K.; Takubo, Y.; Unno, Y.; Takashima, R.; Chilingarov, A.; Fox, H.; Affolder, A. A.; Casse, G.; Dervan, P.; Forshaw, D.; Greenall, A.; Wonsak, S.; Wormald, M.; Cindro, V.; Kramberger, G.; Mandić, I.; Mikuž, M.; Gorelov, I.; Hoeferkamp, M.; Palni, P.; Seidel, S.; Taylor, A.; Toms, K.; Wang, R.; Hessey, N. P.; Valencic, N.; Hanagaki, K.; Dolezal, Z.; Kodys, P.; Bohm, J.; Stastny, J.; Mikestikova, M.; Bevan, A.; Beck, G.; Milke, C.; Domingo, M.; Fadeyev, V.; Galloway, Z.; Hibbard-Lubow, D.; Liang, Z.; Sadrozinski, H. F.-W.; Seiden, A.; To, K.; French, R.; Hodgson, P.; Marin-Reyes, H.; Parker, K.; Jinnouchi, O.; Hara, K.; Sato, K.; Sato, K.; Hagihara, M.; Iwabuchi, S.; Bernabeu, J.; Civera, J. V.; Garcia, C.; Lacasta, C.; Marti i Garcia, S.; Rodriguez, D.; Santoyo, D.; Solaz, C.; Soldevila, U.

2016-09-01

The "ATLAS ITk Strip Sensor Collaboration" R&D group has developed a second iteration of single-sided n+-in-p type micro-strip sensors for use in the tracker upgrade of the ATLAS experiment at the High-Luminosity (HL) LHC. The full size sensors measure approximately 97 × 97mm2 and are designed for tolerance against the 1.1 ×1015neq /cm2 fluence expected at the HL-LHC. Each sensor has 4 columns of 1280 individual 23.9 mm long channels, arranged at 74.5 μm pitch. Four batches comprising 120 sensors produced by Hamamatsu Photonics were evaluated for their mechanical, and electrical bulk and strip characteristics. Optical microscopy measurements were performed to obtain the sensor surface profile. Leakage current and bulk capacitance properties were measured for each individual sensor. For sample strips across the sensor batches, the inter-strip capacitance and resistance as well as properties of the punch-through protection structure were measured. A multi-channel probecard was used to measure leakage current, coupling capacitance and bias resistance for each individual channel of 100 sensors in three batches. The compiled results for 120 unirradiated sensors are presented in this paper, including summary results for almost 500,000 strips probed. Results on the reverse bias voltage dependence of various parameters and frequency dependence of tested capacitances are included for validation of the experimental methods used. Comparing results with specified values, almost all sensors fall well within specification.

AOI [3] High-Temperature Nano-Derived Micro-H 2 and - H 2S Sensors

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sabolsky, Edward M.

2014-08-01

The emissions from coal-fired power plants remain a significant concern for air quality. This environmental challenge must be overcome by controlling the emission of sulfur dioxide (SO 2) and hydrogen sulfide (H 2S) throughout the entire coal combustion process. One of the processes which could specifically benefit from robust, low cost, and high temperature compatible gas sensors is the coal gasification process which converts coal and/or biomass into syngas. Hydrogen (H 2), carbon monoxide (CO) and sulfur compounds make up 33%, 43% and 2% of syngas, respectively. Therefore, development of a high temperature (>500°C) chemical sensor for in-situ monitoring ofmore » H 2, H 2S and SO2 2 levels during coal gasification is strongly desired. The selective detection of SO 2/H 2S in the presence of H 2, is a formidable task for a sensor designer. In order to ensure effective operation of these chemical sensors, the sensor system must inexpensively function within harsh temperature and chemical environment. Currently available sensing approaches, which are based on gas chromatography, electrochemistry, and IR-spectroscopy, do not satisfy the required cost and performance targets. This work focused on the development microsensors that can be applied to this application. In order to develop the high- temperature compatible microsensor, this work addressed various issues related to sensor stability, selectivity, and miniaturization. In the research project entitled “High-Temperature Nano-Derived Micro-H 2 and -H 2S Sensors”, the team worked to develop micro-scale, chemical sensors and sensor arrays composed of nano-derived, metal-oxide composite materials to detect gases like H 2, SO 2, and H 2S within high-temperature environments (>500°C). The research was completed in collaboration with NexTech Materials, Ltd. (Lewis Center, Ohio). NexTech assisted in the testing of the sensors in syngas with contaminate levels of H 2S. The idea of including nanomaterials as the sensing material within resistive-type chemical sensor platforms was to increase the sensitivity (as shown for room temperature applications). Unfortunately, nanomaterials are not stable at high temperatures due to sintering and coarsening processes that are driven by their high surface to volume ratio. Therefore, new hydrogen and sulfur selective nanomaterial systems with high selectivity and stability properties in the proposed harsh environment were investigated. Different nano-morphologies of zirconate, molybdate, and tungstate compounds were investigated. The fabrication of the microsensors consisted of the deposition of the selective nanomaterial systems over metal based interconnects on an inert substrate. This work utilized the chemi-resistive (resistive- type) microsensor architecture where the chemically and structurally stable, high temperature compatible electrodes were sputtered onto a ceramic substrate. The nanomaterial sensing systems were deposited over the electrodes using a lost mold method patterned by conventional optical lithography. The microsensor configuration with optimized nanomaterial system was tested and compared to a millimeter-size sensor e outcomes of this research will contribute to the economical application of sensor arrays for simultaneous sensing of H 2, H 2S, and SO 2.« less

MEMS Technology for Space Applications

NASA Technical Reports Server (NTRS)

vandenBerg, A.; Spiering, V. L.; Lammerink, T. S. J.; Elwenspoek, M.; Bergveld, P.

1995-01-01

Micro-technology enables the manufacturing of all kinds of components for miniature systems or micro-systems, such as sensors, pumps, valves, and channels. The integration of these components into a micro-electro-mechanical system (MEMS) drastically decreases the total system volume and mass. These properties, combined with the increasing need for monitoring and control of small flows in (bio)chemical experiments, makes MEMS attractive for space applications. The level of integration and applied technology depends on the product demands and the market. The ultimate integration is process integration, which results in a one-chip system. An example of process integration is a dosing system of pump, flow sensor, micromixer, and hybrid feedback electronics to regulate the flow. However, for many applications, a hybrid integration of components is sufficient and offers the advantages of design flexibility and even the exchange of components in the case of a modular set up. Currently, we are working on hybrid integration of all kinds of sensors (physical and chemical) and flow system modules towards a modular system; the micro total analysis system (micro TAS). The substrate contains electrical connections as in a printed circuit board (PCB) as well as fluid channels for a circuit channel board (CCB) which, when integrated, form a mixed circuit board (MCB).

Reversible nano-lithography for commercial approaches

NASA Astrophysics Data System (ADS)

Park, Jae Hong; Jang, Hyun Ik; Kim, Woo Choong; Yun, Hae S.; Park, Jun Yong; Jeon, Seok Woo; Kim, Hee Yeoun; Ahn, Chi Won

2016-04-01

The methodology suggested in this research provides the great possibility of creating nanostructures composed of various materials, such as soft polymer, hard polymer, and metal, as well as Si. Such nanostructures are required for a vast range of optical and display devices, photonic components, physical devices, energy devices including electrodes of secondary batteries, fuel cells, solar cells, and energy harvesters, biological devices including biochips, biomimetic or biosimilar structured devices, and mechanical devices including micro- or nano-scale sensors and actuators.

Pyroelectric A1GaN/GaN HEMTs for ion-, gas- and Polar-Liquid Sensors

DTIC Science & Technology

2004-08-17

including the manipulation of pico- and nanofluid volumes on chemical or structural modified surfaces and defining suitable interfaces to the macroworld. A... nanofluidic dispensers based on piezo actuators, the micro periphery and the electronics for measuring biochemical assay systems (in vivo and in vitro...interface without the need of a modulation doped barrier. The carrier concentration and electron mobility within the 2DEG can be very high and build

Micro Autonomous Systems Research: A Methodology for Quantitative Technology Assessment and Prototyping of Unmanned Vehicles

DTIC Science & Technology

2014-06-06

Structure Flex Joints 6828 68% Power Primary: Lithium-Ion 7530 75% Secondary: Fuel Cells (miniature) 8843 88% Sensors IMU /LIDAR 7713 77...mission requirements taken into account; the payload included a LIDAR, sonar, and an IMU . Moreover, the focus moved to the integration of the entire...negligible for any pitch or roll angle less than 15 degrees. The small deflection assumption utilized instead seeks to minimize momentum generation. To

Fiber Optic-Based Refractive Index Sensing at INESC Porto

PubMed Central

Jorge, Pedro A. S.; Silva, Susana O.; Gouveia, Carlos; Tafulo, Paula; Coelho, Luis; Caldas, Paulo; Viegas, Diana; Rego, Gaspar; Baptista, José M.; Santos, José L.; Frazão, Orlando

2012-01-01

A review of refractive index measurement based on different types of optical fiber sensor configurations and techniques is presented. It addresses the main developments in the area, with particular focus on results obtained at INESC Porto, Portugal. The optical fiber sensing structures studied include those based on Bragg and long period gratings, on micro-interferometers, on plasmonic effects in fibers and on multimode interference in a large spectrum of standard and microstructured optical fibers. PMID:22969405

Design and experiment of spectrometer based on scanning micro-grating integrating with angle sensor

NASA Astrophysics Data System (ADS)

Biao, Luo; Wen, Zhi-yu

2014-01-01

A compact, low cost, high speed, non-destructive testing NIR (near infrared) spectrometer optical system based on MOEMS grating device is developed. The MOEMS grating works as the prismatic element and wavelength scanning element in our optical system. The MOEMS grating enables the design of compact grating spectrometers capable of acquiring full spectra using a single detector element. This MOEMS grating is driven by electromagnetic force and integrated with angle sensor which used to monitored deflection angle while the grating working. Comparing with the traditional spectral system, there is a new structure with a single detector and worked at high frequency. With the characteristics of MOEMS grating, the structure of the spectrometer system is proposed. After calculating the parameters of the optical path, ZEMAX optical software is used to simulate the system. According the ZEMAX output file of the 3D model, the prototype is designed by SolidWorks rapidly, fabricated. Designed for a wavelength range between 800 nm and 1500 nm, the spectrometer optical system features a spectral resolution of 16 nm with the volume of 97 mm × 81.7 mm × 81 mm. For the purpose of reduce modulated effect of sinusoidal rotation, spectral intensity of the different wavelength should be compensated by software method in the further. The system satisfies the demand of NIR micro-spectrometer with a single detector.

Non-invasive characterization and quality assurance of silicon micro-strip detectors using pulsed infrared laser

NASA Astrophysics Data System (ADS)

Ghosh, P.

2016-01-01

The Compressed Baryonic Matter (CBM) experiment at FAIR is composed of 8 tracking stations consisting of roughly 1300 double sided silicon micro-strip detectors of 3 different dimensions. For the quality assurance of prototype micro-strip detectors a non-invasive detector charaterization is developed. The test system is using a pulsed infrared laser for charge injection and characterization, called Laser Test System (LTS). The system is aimed to develop a set of characterization procedures which are non-invasive (non-destructive) in nature and could be used for quality assurances of several silicon micro-strip detectors in an efficient, reliable and reproducible way. The procedures developed (as reported here) uses the LTS to scan sensors with a pulsed infra-red laser driven by step motor to determine the charge sharing in-between strips and to measure qualitative uniformity of the sensor response over the whole active area. The prototype detector modules which are tested with the LTS so far have 1024 strips with a pitch of 58 μm on each side. They are read-out using a self-triggering prototype read-out electronic ASIC called n-XYTER. The LTS is designed to measure sensor response in an automatized procedure at several thousand positions across the sensor with focused infra-red laser light (spot size ≈ 12 μm, wavelength = 1060 nm). The pulse with a duration of ≈ 10 ns and power ≈ 5 mW of the laser pulse is selected such, that the absorption of the laser light in the 300 μm thick silicon sensor produces ≈ 24000 electrons, which is similar to the charge created by minimum ionizing particles (MIP) in these sensors. The laser scans different prototype sensors and various non-invasive techniques to determine characteristics of the detector modules for the quality assurance is reported.

Distributed Autonomous Control Action Based on Sensor and Mission Fusion

DTIC Science & Technology

2005-09-01

programmable control algorithm driven by the readings of two pressure switch sensors located on either side of the valve unit. Thus, a micro-controller...and Characterization The process of leak detection and characterization must be accomplished with a set of pressure switch sensors. This sensor...economically supplementing existing widely used pressure switch type sensors which are characterized by prohibitively long inertial lag responses

Fabrication of highly sensitive and selective H₂ gas sensor based on SnO₂ thin film sensitized with microsized Pd islands.

PubMed

Nguyen, Van Toan; Nguyen, Viet Chien; Nguyen, Van Duy; Hoang, Si Hong; Hugo, Nguyen; Nguyen, Duc Hoa; Nguyen, Van Hieu

2016-01-15

Ultrasensitive and selective hydrogen gas sensor is vital component in safe use of hydrogen that requires a detection and alarm of leakage. Herein, we fabricated a H2 sensing devices by adopting a simple design of planar-type structure sensor in which the heater, electrode, and sensing layer were patterned on the front side of a silicon wafer. The SnO2 thin film-based sensors that were sensitized with microsized Pd islands were fabricated at a wafer-scale by using a sputtering system combined with micro-electronic techniques. The thicknesses of SnO2 thin film and microsized Pd islands were optimized to maximize the sensing performance of the devices. The optimized sensor could be used for monitoring hydrogen gas at low concentrations of 25-250 ppm, with a linear dependence to H2 concentration and a fast response and recovery time. The sensor also showed excellent selectivity for monitoring H2 among other gases, such as CO, NH3, and LPG, and satisfactory characteristics for ensuring safety in handling hydrogen. The hydrogen sensing characteristics of the sensors sensitized with Pt and Au islands were also studied to clarify the sensing mechanisms. Copyright © 2015 Elsevier B.V. All rights reserved.

Reliable aluminum contact formation by electrostatic bonding

NASA Astrophysics Data System (ADS)

Kárpáti, T.; Pap, A. E.; Radnóczi, Gy; Beke, B.; Bársony, I.; Fürjes, P.

2015-07-01

The paper presents a detailed study of a reliable method developed for aluminum fusion wafer bonding assisted by the electrostatic force evolving during the anodic bonding process. The IC-compatible procedure described allows the parallel formation of electrical and mechanical contacts, facilitating a reliable packaging of electromechanical systems with backside electrical contacts. This fusion bonding method supports the fabrication of complex microelectromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) structures with enhanced temperature stability, which is crucial in mechanical sensor applications such as pressure or force sensors. Due to the applied electrical potential of  -1000 V the Al metal layers are compressed by electrostatic force, and at the bonding temperature of 450 °C intermetallic diffusion causes aluminum ions to migrate between metal layers.

Micro-reactors for characterization of nanostructure-based sensors.

PubMed

Savu, R; Silveira, J V; Flacker, A; Vaz, A R; Joanni, E; Pinto, A C; Gobbi, A L; Santos, T E A; Rotondaro, A L P; Moshkalev, S A

2012-05-01

Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO(2) substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10(-5) and 10(-1) mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.

Micro-reactors for characterization of nanostructure-based sensors

NASA Astrophysics Data System (ADS)

Savu, R.; Silveira, J. V.; Flacker, A.; Vaz, A. R.; Joanni, E.; Pinto, A. C.; Gobbi, A. L.; Santos, T. E. A.; Rotondaro, A. L. P.; Moshkalev, S. A.

2012-05-01

Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO2 substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10-5 and 10-1 mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.

Coupled sensor/platform control design for low-level chemical detection with position-adaptive micro-UAVs

NASA Astrophysics Data System (ADS)

Goodwin, Thomas; Carr, Ryan; Mitra, Atindra K.; Selmic, Rastko R.

2009-05-01

We discuss the development of Position-Adaptive Sensors [1] for purposes for detecting embedded chemical substances in challenging environments. This concept is a generalization of patented Position-Adaptive Radar Concepts developed at AFRL for challenging conditions such as urban environments. For purposes of investigating the detection of chemical substances using multiple MAV (Micro-UAV) platforms, we have designed and implemented an experimental testbed with sample structures such as wooden carts that contain controlled leakage points. Under this general concept, some of the members of a MAV swarm can serve as external position-adaptive "transmitters" by blowing air over the cart and some of the members of a MAV swarm can serve as external position-adaptive "receivers" that are equipped with chemical or biological (chem/bio) sensors that function as "electronic noses". The objective can be defined as improving the particle count of chem/bio concentrations that impinge on a MAV-based position-adaptive sensor that surrounds a chemical repository, such as a cart, via the development of intelligent position-adaptive control algorithms. The overall effect is to improve the detection and false-alarm statistics of the overall system. Within the major sections of this paper, we discuss a number of different aspects of developing our initial MAV-Based Sensor Testbed. This testbed includes blowers to simulate position-adaptive excitations and a MAV from Draganfly Innovations Inc. with stable design modifications to accommodate our chem/bio sensor boom design. We include details with respect to several critical phases of the development effort including development of the wireless sensor network and experimental apparatus, development of the stable sensor boom for the MAV, integration of chem/bio sensors and sensor node onto the MAV and boom, development of position-adaptive control algorithms and initial tests at IDCAST (Institute for the Development and Commercialization of Advanced Sensor Technologies), and autonomous positionadaptive chem/bio tests and demos in the MAV Lab at AFRL Air Vehicles Directorate. For this particular MAV implementation of chem/bio sensors, we selected miniature Methane, Nitrogen Dioxide, and Carbon Monoxide sensors. To safely simulate the behavior of chem/bio substances in our laboratory environment, we used either cigarette smoke or incense. We present a set of concise parametric results along with visual demonstration of our new position-adaptive sensor capability. Two types of experiments were conducted: with sensor nodes screening the chemical contaminant (cigarette smoke or incense) without MAVs, and with a sensor node integrated with the MAV. It was shown that the MOS-based chemical sensors could be used for chemical leakage detection, as well as for position-adaptive sensors on air/ground vehicles as sniffers for chemical contaminants.

Feasibility of Frequency-Modulated Wireless Transmission for a Multi-Purpose MEMS-Based Accelerometer

PubMed Central

Sabato, Alessandro; Feng, Maria Q.

2014-01-01

Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy—especially at very low frequencies—have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline. PMID:25198003

Development of a High-Sensitivity Wireless Accelerometer for Structural Health Monitoring

PubMed Central

Zhu, Li; Fu, Yuguang; Chow, Raymond; Spencer, Billie F.; Park, Jong Woong; Mechitov, Kirill

2018-01-01

Structural health monitoring (SHM) is playing an increasingly important role in ensuring the safety of structures. A shift of SHM research away from traditional wired methods toward the use of wireless smart sensors (WSS) has been motivated by the attractive features of wireless smart sensor networks (WSSN). The progress achieved in Micro Electro-Mechanical System (MEMS) technologies and wireless data transmission, has extended the effectiveness and range of applicability of WSSNs. One of the most common sensors employed in SHM strategies is the accelerometer; however, most accelerometers in WSS nodes have inadequate resolution for measurement of the typical accelerations found in many SHM applications. In this study, a high-resolution and low-noise tri-axial digital MEMS accelerometer is incorporated in a next-generation WSS platform, the Xnode. In addition to meeting the acceleration sensing demands of large-scale civil infrastructure applications, this new WSS node provides powerful hardware and a robust software framework to enable edge computing that can deliver actionable information. Hardware and software integration challenges are presented, and the associate resolutions are discussed. The performance of the wireless accelerometer is demonstrated experimentally through comparison with high-sensitivity wired accelerometers. This new high-sensitivity wireless accelerometer will extend the use of WSSN to a broader class of SHM applications. PMID:29342102

Development of a High-Sensitivity Wireless Accelerometer for Structural Health Monitoring.

PubMed

Zhu, Li; Fu, Yuguang; Chow, Raymond; Spencer, Billie F; Park, Jong Woong; Mechitov, Kirill

2018-01-17

Structural health monitoring (SHM) is playing an increasingly important role in ensuring the safety of structures. A shift of SHM research away from traditional wired methods toward the use of wireless smart sensors (WSS) has been motivated by the attractive features of wireless smart sensor networks (WSSN). The progress achieved in Micro Electro-Mechanical System (MEMS) technologies and wireless data transmission, has extended the effectiveness and range of applicability of WSSNs. One of the most common sensors employed in SHM strategies is the accelerometer; however, most accelerometers in WSS nodes have inadequate resolution for measurement of the typical accelerations found in many SHM applications. In this study, a high-resolution and low-noise tri-axial digital MEMS accelerometer is incorporated in a next-generation WSS platform, the Xnode. In addition to meeting the acceleration sensing demands of large-scale civil infrastructure applications, this new WSS node provides powerful hardware and a robust software framework to enable edge computing that can deliver actionable information. Hardware and software integration challenges are presented, and the associate resolutions are discussed. The performance of the wireless accelerometer is demonstrated experimentally through comparison with high-sensitivity wired accelerometers. This new high-sensitivity wireless accelerometer will extend the use of WSSN to a broader class of SHM applications.

Feasibility of frequency-modulated wireless transmission for a multi-purpose MEMS-based accelerometer.

PubMed

Sabato, Alessandro; Feng, Maria Q

2014-09-05

Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy--especially at very low frequencies--have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, the MEMS sensor's analog signals are converted to digital signals before radio-frequency (RF) wireless transmission. The conversion can cause a low sensitivity to the important low-frequency and low-amplitude signals. To overcome this difficulty, the authors have developed a MEMS accelerometer system, which converts the sensor output voltage to a frequency-modulated signal before RF transmission. This is achieved by using a Voltage to Frequency Conversion (V/F) instead of the conventional Analog to Digital Conversion (ADC). In this paper, a prototype MEMS accelerometer system is presented, which consists of a transmitter and receiver circuit boards. The former is equipped with a MEMS accelerometer, a V/F converter and a wireless RF transmitter, while the latter contains an RF receiver and a F/V converter for demodulating the signal. The efficacy of the MEMS accelerometer system in measuring low-frequency and low-amplitude dynamic responses is demonstrated through extensive laboratory tests and experiments on a flow-loop pipeline.

Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors

PubMed Central

Thuau, Damien; Abbas, Mamatimin; Wantz, Guillaume; Hirsch, Lionel; Dufour, Isabelle; Ayela, Cédric

2016-01-01

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sensor with a cutting-edge electro-mechanical transducer based on an active organic field effect transistor (OFET) has been demonstrated. Using poly(vinylidenefluoride/trifluoroethylene) (P(VDF-TrFE)) piezoelectric polymer as active gate dielectric in the transistor mounted on a polymeric micro-cantilever, unique electro-mechanical properties were observed. Such an advanced scheme enables highly efficient integrated electro-mechanical transduction for physical and chemical sensing applications. Record relative sensitivity over 600 in the low strain regime (<0.3%) was demonstrated, which represents a key-step for the development of highly sensitive all organic MEMS-based sensors. PMID:27924853

Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors.

PubMed

Thuau, Damien; Abbas, Mamatimin; Wantz, Guillaume; Hirsch, Lionel; Dufour, Isabelle; Ayela, Cédric

2016-12-07

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sensor with a cutting-edge electro-mechanical transducer based on an active organic field effect transistor (OFET) has been demonstrated. Using poly(vinylidenefluoride/trifluoroethylene) (P(VDF-TrFE)) piezoelectric polymer as active gate dielectric in the transistor mounted on a polymeric micro-cantilever, unique electro-mechanical properties were observed. Such an advanced scheme enables highly efficient integrated electro-mechanical transduction for physical and chemical sensing applications. Record relative sensitivity over 600 in the low strain regime (<0.3%) was demonstrated, which represents a key-step for the development of highly sensitive all organic MEMS-based sensors.

Fabrication of PDMS architecture

NASA Astrophysics Data System (ADS)

Adam, Tijjani; Hashim, U.

2017-03-01

The study report novel, yet simple and flexible fabrication method for micro channel patterning PDMS thin mold on glass surfaces, the method allows microstructures with critical dimensions to be formed using PDMS. Micro channel production is a two-step process. First, soft photolithography methods are implemented to fabricate a reusable mold. The mold is then used to create the micro channel, which consists of SU8, PDMS and glass. The micro channel design was performed using AutoCAD and the fabrication begins by creating a replicable mold. The mold is created on a glass slide. by spin-coating speed between 500 to 1250rpm with an acceleration of 100 rpm/s for 100 and 15 second ramp up and down speed respectively. Channel flow rate based on concentration were measured by analyzing the recorded flow profiles which was collected from the high powered microscope at. 80µ, 70µm, 50µm for inlet channel 1, 2, 3 respectively the channel flow were compared for flow efficiency at different concentrations and Re. Thus, the simplicity of device structure and fabrication makes it feasible to miniaturize it for the development of point-of-care kits, facilitating its use in both clinical and non-clinical environments. With its simple geometric structure and potential for mass commercial fabrication, the device can be developed to become a portable photo detection sensor that can be use for both environmental and diagnostic application.

Useful method to monitor the physiological effects of alcohol ingestion by combination of micro-integrated laser Doppler blood flow meter and arm-raising test.

PubMed

Iwasaki, Wataru; Nogami, Hirofumi; Ito, Hiroki; Gotanda, Takeshi; Peng, Yao; Takeuchi, Satoshi; Furue, Masutaka; Higurashi, Eiji; Sawada, Renshi

2012-10-01

Alcohol has a variety of effects on the human body, affecting both the sympathetic and parasympathetic nervous system. We examined the peripheral blood flow of alcohol drinkers using a micro-integrated laser Doppler blood flow meter (micro-electromechanical system blood flow sensor). An increased heart rate and blood flow was recorded at the earlobe after alcohol ingestion, and we observed strong correlation between blood flow, heart rate, and breath alcohol content in light drinkers; but not heavy drinkers. We also found that the amplitude of pulse waves measured at the fingertip during an arm-raising test significantly decreased on alcohol consumption, regardless of the individual's alcohol tolerance. Our micro-electromechanical system blood flow sensor successfully detected various physiological changes in peripheral blood circulation induced by alcohol consumption.

Fundamental understanding and rational design of high energy structural microbatteries

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Yuxing; Li, Qiuyan; Cartmell, Samuel

Microbatteries play a critical role in determining the lifetime of downsized sensors, wearable devices and medical applications, etc. More often, structural batteries are required from the perspective of aesthetics and space utilization, which is however rarely explored. Herein, we discuss the fundamental issues associated with the rational design of practically usable high energy microbatteries. The tubular shape of the cell further allows the flexible integration of microelectronics. A functioning acoustic micro-transmitter continuously powered by this tubular battery has been successfully demonstrated. Multiple design features adopted to accommodate large mechanical stress during the rolling process are discussed providing new insights inmore » designing the structural microbatteries for emerging technologies.« less

Nanocrystalline ZnON; High mobility and low band gap semiconductor material for high performance switch transistor and image sensor application

PubMed Central

Lee, Eunha; Benayad, Anass; Shin, Taeho; Lee, HyungIk; Ko, Dong-Su; Kim, Tae Sang; Son, Kyoung Seok; Ryu, Myungkwan; Jeon, Sanghun; Park, Gyeong-Su

2014-01-01

Interest in oxide semiconductors stems from benefits, primarily their ease of process, relatively high mobility (0.3–10 cm2/vs), and wide-bandgap. However, for practical future electronic devices, the channel mobility should be further increased over 50 cm2/vs and wide-bandgap is not suitable for photo/image sensor applications. The incorporation of nitrogen into ZnO semiconductor can be tailored to increase channel mobility, enhance the optical absorption for whole visible light and form uniform micro-structure, satisfying the desirable attributes essential for high performance transistor and visible light photo-sensors on large area platform. Here, we present electronic, optical and microstructural properties of ZnON, a composite of Zn3N2 and ZnO. Well-optimized ZnON material presents high mobility exceeding 100 cm2V−1s−1, the band-gap of 1.3 eV and nanocrystalline structure with multiphase. We found that mobility, microstructure, electronic structure, band-gap and trap properties of ZnON are varied with nitrogen concentration in ZnO. Accordingly, the performance of ZnON-based device can be adjustable to meet the requisite of both switch device and image-sensor potentials. These results demonstrate how device and material attributes of ZnON can be optimized for new device strategies in display technology and we expect the ZnON will be applicable to a wide range of imaging/display devices. PMID:24824778

Use of Multi-Functional Flexible Micro-Sensors for in situ Measurement of Temperature, Voltage and Fuel Flow in a Proton Exchange Membrane Fuel Cell

PubMed Central

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased. PMID:22163545

Micro-differential scanning calorimeter for liquid biological samples

DOE PAGES

Wang, Shuyu; Yu, Shifeng; Siedler, Michael S.; ...

2016-10-20

Here, we developed an ultrasensitive micro-DSC (differential scanning calorimeter) for liquid protein sample characterization. Our design integrated vanadium oxide thermistors and flexible polymer substrates with microfluidics chambers to achieve a high sensitivity (6 V/W), low thermal conductivity (0.7 mW/K), high power resolutions (40 nW), and well-defined liquid volume (1 μl) calorimeter sensor in a compact and cost-effective way. Furthermore, we demonstrated the performance of the sensor with lysozyme unfolding. The measured transition temperature and enthalpy change were in accordance with the previous literature data. This micro-DSC could potentially raise the prospect of high-throughput biochemical measurement by parallel operation with miniaturizedmore » sample consumption.« less

Integrated micro-electro-mechanical sensor development for inertial applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

Allen, J.J.; Kinney, R.D.; Sarsfield, J.

Electronic sensing circuitry and micro electro mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper will describe the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.

Third-generation imaging sensor system concepts

NASA Astrophysics Data System (ADS)

Reago, Donald A.; Horn, Stuart B.; Campbell, James, Jr.; Vollmerhausen, Richard H.

1999-07-01

Second generation forward looking infrared sensors, based on either parallel scanning, long wave (8 - 12 um) time delay and integration HgCdTe detectors or mid wave (3 - 5 um), medium format staring (640 X 480 pixels) InSb detectors, are being fielded. The science and technology community is now turning its attention toward the definition of a future third generation of FLIR sensors, based on emerging research and development efforts. Modeled third generation sensor performance demonstrates a significant improvement in performance over second generation, resulting in enhanced lethality and survivability on the future battlefield. In this paper we present the current thinking on what third generation sensors systems will be and the resulting requirements for third generation focal plane array detectors. Three classes of sensors have been identified. The high performance sensor will contain a megapixel or larger array with at least two colors. Higher operating temperatures will also be the goal here so that power and weight can be reduced. A high performance uncooled sensor is also envisioned that will perform somewhere between first and second generation cooled detectors, but at significantly lower cost, weight, and power. The final third generation sensor is a very low cost micro sensor. This sensor can open up a whole new IR market because of its small size, weight, and cost. Future unattended throwaway sensors, micro UAVs, and helmet mounted IR cameras will be the result of this new class.

Sensor Fusion of Position- and Micro-Sensors (MEMS) integrated in a Wireless Sensor Network for movement detection in landslide areas

NASA Astrophysics Data System (ADS)

Arnhardt, Christian; Fernández-Steeger, Tomas; Azzam, Rafig

2010-05-01

Monitoring systems in landslide areas are important elements of effective Early Warning structures. Data acquisition and retrieval allows the detection of movement processes and thus is essential to generate warnings in time. Apart from the precise measurement, the reliability of data is fundamental, because outliers can trigger false alarms and leads to the loss of acceptance of such systems. For the monitoring of mass movements and their risk it is important to know, if there is movement, how fast it is and how trustworthy is the information. The joint project "Sensorbased landslide early warning system" (SLEWS) deals with these questions, and tries to improve data quality and to reduce false alarm rates, due to the combination of sensor date (sensor fusion). The project concentrates on the development of a prototypic Alarm- and Early Warning system (EWS) for different types of landslides by using various low-cost sensors, integrated in a wireless sensor network (WSN). The network consists of numerous connection points (nodes) that transfer data directly or over other nodes (Multi-Hop) in real-time to a data collection point (gateway). From there all the data packages are transmitted to a spatial data infrastructure (SDI) for further processing, analyzing and visualizing with respect to end-user specifications. The ad-hoc characteristic of the network allows the autonomous crosslinking of the nodes according to existing connections and communication strength. Due to the independent finding of new or more stable connections (self healing) a breakdown of the whole system is avoided. The bidirectional data stream enables the receiving of data from the network but also allows the transfer of commands and pointed requests into the WSN. For the detection of surface deformations in landslide areas small low-cost Micro-Electro-Mechanical-Systems (MEMS) and positionsensors from the automobile industries, different industrial applications and from other measurement technologies were chosen. The MEMS-Sensors are acceleration-, tilt- and barometric pressure sensors. The positionsensors are draw wire and linear displacement transducers. In first laboratory tests the accuracy and resolution were investigated. The tests showed good results for all sensors. For example tilt-movements can be monitored with an accuracy of +/- 0,06° and a resolution of 0,1°. With the displacement transducer change in length of >0,1mm is possible. Apart from laboratory tests, field tests in South France and Germany were done to prove data stability and movement detection under real conditions. The results obtained were very satisfying, too. In the next step the combination of numerous sensors (sensor fusion) of the same type (redundancy) or different types (complementary) was researched. Different experiments showed that there is a high concordance between identical sensor-types. According to different sensor parameters (sensitivity, accuracy, resolution) some sensor-types can identify changes earlier. Taking this into consideration, good correlations between different kinds of sensors were achieved, too. Thus the experiments showed that combination of sensors is possible and this could improve the detection of movement and movement rate but also outliers. Based on this results various algorithms were setup that include different statistical methods (outlier tests, testing of hypotheses) and procedures from decision theories (Hurwicz-criteria). These calculation formulas will be implemented in the spatial data infrastructure (SDI) for the further data processing and validation. In comparison with today existing mainly punctually working monitoring systems, the application of wireless sensor networks in combination with low-cost, but precise micro-sensors provides an inexpensive and easy to set up monitoring system also in large areas. The correlation of same but also different sensor-types permits a good data control. Thus the sensor fusion is a promising tool to detect movement more reliable and thus contributes essential to the improvement of Early Warning Systems.

Fiber optic temperature sensor

NASA Technical Reports Server (NTRS)

Quick, William H. (Inventor); August, Rudolf R. (Inventor); James, Kenneth A. (Inventor); Strahan, Jr., Virgil H. (Inventor); Nichols, Donald K. (Inventor)

1980-01-01

An inexpensive, lightweight fiber optic micro-sensor that is suitable for applications which may require remote temperature sensing. The disclosed temperature sensor includes a phosphor material that, after receiving incident light stimulation, is adapted to emit phosphorescent radiation output signals, the amplitude decay rate and wavelength of which are functions of the sensed temperature.

Microfabricated Air-Microfluidic Sensor for Personal Monitoring of Airborne Particulate Matter: Design, Fabrication, and Experimental Results

EPA Science Inventory

We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring P...

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements : tech transfer summary.

DOT National Transportation Integrated Search

2016-08-01

Micro-electromechanical sensors and systems- (MEMS)-based and : wireless-based smart-sensing technologies have, until now, rarely : been used for monitoring pavement response in the field, and the : requirements for using such smart sensing technolog...

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

PubMed Central

Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng

2010-01-01

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficient α related to the two frequency shifts is confirmed. PMID:22163588

Piezoresistive strain sensing of carbon nanotubes-based composite skin for aeronautical morphing structures

NASA Astrophysics Data System (ADS)

Viscardi, Massimo; Arena, Maurizio; Barra, Giuseppina; Vertuccio, Luigi; Ciminello, Monica; Guadagno, Liberata

2018-03-01

Nowadays, smart composites based on different nano-scale carbon fillers, such as carbon nanotubes (CNTs), are increasingly being thought of as a more possible alternative solution to conventional smart materials, mainly for their improved electrical properties. Great attention is being given by the research community in designing highly sensitive strain sensors for more and more ambitious challenges: in such context, interest fields related to carbon nanotubes have seen extraordinary development in recent years. The authors aim to provide the most contemporary overview possible of carbon nanotube-based strain sensors for aeronautical application. A smart structure as a morphing wing needs an embedded sensing system in order to measure the actual deformation state as well as to "monitor" the structural conditions. Looking at more innovative health monitoring tools for the next generation of composite structures, a resin strain sensor has been realized. The epoxy resin was first analysed by means of a micro-tension test, estimating the electrical resistance variations as function of the load, in order to demonstrate the feasibility of the sensor. The epoxy dogbone specimen has been equipped with a standard strain gauge to quantify its strain sensitivity. The voltamperometric tests highlight a good linearity of the electrical resistance value as the load increases at least in the region of elastic deformation of the material. Such intrinsic piezoresistive performance is essentially attributable to the re-arrangement of conductive percolating network formed by MWCNT, induced by the deformation of the material due to the applied loads. The specimen has been prepared within this investigation, to demonstrate its performance for a future composite laminate typical of aerospace structures. The future carbon-fiber sensor can replace conventional metal foil strain gauges in aerospace applications. Furthermore, dynamic tests will be carried out to detect any non-reversible changes to the sensing response.

Fiber optic micro sensor for the measurement of tendon forces

PubMed Central

2012-01-01

A fiber optic sensor developed for the measurement of tendon forces was designed, numerically modeled, fabricated, and experimentally evaluated. The sensor incorporated fiber Bragg gratings and micro-fabricated stainless steel housings. A fiber Bragg grating is an optical device that is spectrally sensitive to axial strain. Stainless steel housings were designed to convert radial forces applied to the housing into axial forces that could be sensed by the fiber Bragg grating. The metal housings were fabricated by several methods including laser micromachining, swaging, and hydroforming. Designs are presented that allow for simultaneous temperature and force measurements as well as for simultaneous resolution of multi-axis forces. The sensor was experimentally evaluated by hydrostatic loading and in vitro testing. A commercial hydraulic burst tester was used to provide uniform pressures on the sensor in order to establish the linearity, repeatability, and accuracy characteristics of the sensor. The in vitro experiments were performed in excised tendon and in a dynamic gait simulator to simulate biological conditions. In both experimental conditions, the sensor was found to be a sensitive and reliable method for acquiring minimally invasive measurements of soft tissue forces. Our results suggest that this sensor will prove useful in a variety of biomechanical measurements. PMID:23033868

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems.

PubMed

Helwig, Andreas; Hackner, Angelika; Müller, Gerhard; Zappa, Dario; Sberveglieri, Giorgio

2018-02-03

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R 0 , and under gas exposure, R g a s , to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response R e s p = ( R 0 - R g a s ) / R 0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors.

Micro Electro-Mechanical System (MEMS) Pressure Sensor for Footwear

DOEpatents

Kholwadwala, Deepesh K.; Rohrer, Brandon R.; Spletzer, Barry L.; Galambos, Paul C.; Wheeler, Jason W.; Hobart, Clinton G.; Givler, Richard C.

2008-09-23

Footwear comprises a sole and a plurality of sealed cavities contained within the sole. The sealed cavities can be incorporated as deformable containers within an elastic medium, comprising the sole. A plurality of micro electro-mechanical system (MEMS) pressure sensors are respectively contained within the sealed cavity plurality, and can be adapted to measure static and dynamic pressure within each of the sealed cavities. The pressure measurements can provide information relating to the contact pressure distribution between the sole of the footwear and the wearer's environment.

Sensitive Capacitive-type Hydrogen Sensor Based on Ni Thin Film in Different Hydrogen Concentrations.

PubMed

Pour, Ghobad Behzadi; Aval, Leila Fekri; Eslami, Shahnaz

2018-04-01

Hydrogen sensors are micro/nano-structure that are used to locate hydrogen leaks. They are considered to have fast response/recovery time and long lifetime as compared to conventional gas sensors. In this paper, fabrication of sensitive capacitive-type hydrogen gas sensor based on Ni thin film has been investigated. The C-V curves of the sensor in different hydrogen concentrations have been reported. Dry oxidation was done in thermal chemical vapor deposition furnace (TCVD). For oxidation time of 5 min, the oxide thickness was 15 nm and for oxidation time 10 min, it was 20 nm. The Ni thin film as a catalytic metal was deposited on the oxide film using electron gun deposition. Two MOS sensors were compared with different oxide film thickness and different hydrogen concentrations. The highest response of the two MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 87.5% and 65.4% respectively. The fast response times for MOS sensors with 15 nm and 20 nm oxide film thickness in 4% hydrogen concentration was 8 s and 21 s, respectively. By increasing the hydrogen concentration from 1% to 4%, the response time for MOS sensor (20nm oxide thickness), was decreased from 28s to 21s. The recovery time was inversely increased from 237s to 360s. The experimental results showed that the MOS sensor based on Ni thin film had a quick response and a high sensitivity.

A multifunctional PVDF-based tactile sensor for minimally invasive surgery

NASA Astrophysics Data System (ADS)

Sokhanvar, S.; Packirisamy, M.; Dargahi, J.

2007-08-01

In this paper a multifunctional tactile sensor system using PVDF (polyvinylidene fluoride), is proposed, designed, analyzed, tested and validated. The working principle of the sensor is in such a way that it can be used in combination with almost any end-effectors. However, the sensor is particularly designed to be integrated with minimally invasive surgery (MIS) tools. In addition, the structural and transduction materials are selected to be compatible with micro-electro-mechanical systems (MEMS) technology, so that miniaturization would be possible. The corrugated shape of the sensor ensures the safe tissue grasping and compatibility with the traditional tooth-like end effectors of MIS tools. A unit of this sensor comprised of a base, a flexible beam and three PVDF sensing elements. Two PVDF sensing elements sandwiched at the end supports work in thickness mode to measure the magnitude and position of applied load. The third PVDF sensing element is attached to the beam and it works in the extensional mode to measure the softness of the contact object. The proposed sensor is modeled both analytically and numerically and a series of simulations are performed in order to estimate the characteristics of the sensor in measuring the magnitude and position of a point load, distributed load, and also the softness of the contact object. Furthermore, in order to validate the theoretical results, the prototyped sensor was tested and the results are compared. The results are very promising and proving the capability of the sensor for haptic sensing.

SSTAC/ARTS review of the draft Integrated Technology Plan (ITP). Volume 6: Controls and guidance

NASA Technical Reports Server (NTRS)

1991-01-01

Viewgraphs of briefings from the Space Systems and Technology Advisory Committee (SSTAC)/ARTS review of the draft Integrated Technology Plan (ITP) on controls and guidance are included. Topics covered include: strategic avionics technology planning and bridging programs; avionics technology plan; vehicle health management; spacecraft guidance research; autonomous rendezvous and docking; autonomous landing; computational control; fiberoptic rotation sensors; precision instrument and telescope pointing; microsensors and microinstruments; micro guidance and control initiative; and earth-orbiting platforms controls-structures interaction.

Strain gauge using Si-based optical microring resonator.

PubMed

Lei, Longhai; Tang, Jun; Zhang, Tianen; Guo, Hao; Li, Yanna; Xie, Chengfeng; Shang, Chenglong; Bi, Yu; Zhang, Wendong; Xue, Chenyang; Liu, Jun

2014-12-20

This paper presents a strain gauge using the mechanical-optical coupling method. The Si-based optical microring resonator was employed as the sensing element, which was embedded on the microcantilevers. The experimental results show that applying external strain triggers a clear redshift of the output resonant spectrum of the structure. The sensitivity of 93.72  pm/MPa was achieved, which also was verified using theoretical simulations. This paper provides what we believe is a new method to develop micro-opto-electromechanical system (MOEMS) sensors.

Model compilation for real-time planning and diagnosis with feedback

NASA Technical Reports Server (NTRS)

Barrett, Anthony

2005-01-01

This paper describes MEXEC, an implemented micro executive that compiles a device model that can have feedback into a structure for subsequent evaluation. This system computes both the most likely current device mode from n sets of sensor measurements and the n-1 step reconfiguration plan that is most likely to result in reaching a target mode - if such a plan exists. A user tunes the system by increasing n to improve system capability at the cost of real-time performance.

A time-based front-end ASIC for the silicon micro strip sensors of the bar PANDA Micro Vertex Detector

NASA Astrophysics Data System (ADS)

Di Pietro, V.; Brinkmann, K.-Th.; Riccardi, A.; Ritman, J.; Rivetti, A.; Rolo, M. D.; Stockmanns, T.; Zambanini, A.

2016-03-01

The bar PANDA (Antiproton Annihilation at Darmstadt) experiment foresees many detectors for tracking, particle identification and calorimetry. Among them, the innermost is the MVD (Micro Vertex Detector) responsible for a precise tracking and the reconstruction of secondary vertices. This detector will be built from both hybrid pixel (two inner barrels and six forward disks) and double-sided micro strip (two outer barrels and outer rim of the last two disks) silicon sensors. A time-based approach has been chosen for the readout ASIC of the strip sensors. The PASTA (bar PANDA Strip ASIC) chip aims at high resolution time-stamping and charge information through the Time over Threshold (ToT) technique. It benefits from a Time to Digital Converter (TDC) allowing a time bin width down to 50 ps. The analog front-end was designed to serve both n-type and p-type strips and the performed simulations show remarkable performances in terms of linearity and electronic noise. The TDC consists of an analog interpolator, a digital local controller, and a digital global controller as the common back-end for all of the 64 channels.

Development of novel acoustic wave biosensor platforms based on magnetostriction and fabrication of magnetostrictive nanowires

NASA Astrophysics Data System (ADS)

Li, Suiqiong

There is an urgent need for biosensors that are able to detect and quantify the presence of a small amount of biological threat agents in a real-time manner. Acoustic wave (AW) devices, whose performance is defined by mass sensitivity (Sm) and merit quality factor (Q value), have been extensively studied as high performance biosensor platforms. However, current AW devices face some challenges in practical applications. In this research, two types of AW devices---magnetostrictive microcantilever (MSMC) and completely free-standing magnetostrictive particle (MSP)---were developed. The research consists of two parts: (1) Design and the feasibility study of MSMC and MSP based sensor technology; (2) Fabrication and characterization of micro/nano MSPs made of amorphous Fe-B alloy. Both MSMC and MSP based sensors are wireless/remote and work well in liquid, which makes the sensors good candidates for in-situ detection. The performance of MSMC was simulated and compared with the state of art AW devices: microcantilevers. The MSMC exhibits the following advantages: (1) remote/wireless driving and sensing; (2) ease of fabrication; (3) works well in liquid; (4) exhibits a high Q value (> 500 in air); (5) well suited for sensor array development. MSMCs in milli/micro sizes were fabricated and their performance was characterized in air and liquid. The experimental results confirm the advantages of MSMC mentioned above. The in situ detection of the yeast cells and Bacillus anthracis spores in water were performed using MSMC biosensors. MSPs in the shape of strip and bar were investigated. Strip-shape MSPs in milli/micro sizes were fabricated. The resonance behaviors of MSPs at the even and odd vibration modes were analyzed. MSP exhibits a Sm about 100 times greater, and a Q value about 10 times greater, than MCs. A multiple-sensor and a multiple-target approach were developed to further enhance the performance of MSP-based sensors. A unique methodology was created to detect the target species on the sensor surface at different locations by combining even and odd harmonic mode signals. As with other AW devices, a smaller size results in a higher Sm . To create micro/nano sized MSMC & MSP sensors, amorphous Fe-B thin films and nanowires were fabricated using electrochemical deposition. The microstructure, morphology, composition and magnetic properties of the fabricated nanowires were determined. It is found that the films and the nanowires are excellent candidates for developing micro/nano MSPs and MSMCs.

Multicomponent micropatterned sol-gel materials by capillary molding

NASA Astrophysics Data System (ADS)

Lochhead, Michael J.; Yager, Paul

1997-10-01

A physically and chemically benign method for patterning multiple sol-gel materials onto a single substrate is described. Structures are demonstrated for potential micro- optical chemical sensor, biosensor, and waveguiding applications. Fabrication is based on the micro molding in capillaries (MIMIC) approach. A novel mold design allows several sols to be cast simultaneously. Closely spaced, organically modified silica ridges containing fluorescent dyes are demonstrated. Ridges have cross sectional dimensions from one to 50 micrometers and are centimeters in length. Processing issues, particularly those related to mold filling, are discussed in detail. Because sol-gel MIMIC avoids the harsh physical and chemical environments normally associated with patterning, the approach allows full exploitation of sol- gel processing advantages, such as the ability to entrap sensitive organic dopant molecules in the sol-gel matrix.

An Overview of the Micro Pulse Lidar Network (MPLNET)

NASA Technical Reports Server (NTRS)

Welton, Ellsworth

2010-01-01

The NASA Micro Pulse Lidar Network (MPLNET) is a federated network of Micro Pulse Lidar (MPL) systems designed to measure aerosol and cloud vertical structure continuously, day and night, over long time periods required to contribute to climate change studies and provide ground validation for models and satellite sensors in the NASA Earth Observing System (FOS). At present, there are eighteen active sites worldwide, and several more in the planning stage. Numerous temporary sites are deployed in support of various field campaigns. Most MPLNET sites are co-located with sites in the NASA Aerosol Robotic Network (AERONET) to provide both column and vertically resolved aerosol and cloud data. MPLNET data and more information on the project are available at http://mpinet.gsfc.nasa.gov . Here we present a summary of the first ten years of MPLNET, along with an overview of our current status, specifically our version two data products and applications. Future network plans will be presented, with a focus on our activities in South East Asia.

A Molecular Electronic Transducer based Low-Frequency Accelerometer with Electrolyte Droplet Sensing Body

NASA Astrophysics Data System (ADS)

Liang, Mengbing

"Sensor Decade" has been labeled on the first decade of the 21st century. Similar to the revolution of micro-computer in 1980s, sensor R&D developed rapidly during the past 20 years. Hard workings were mainly made to minimize the size of devices with optimal the performance. Efforts to develop the small size devices are mainly concentrated around Micro-electro-mechanical-system (MEMS) technology. MEMS accelerometers are widely published and used in consumer electronics, such as smart phones, gaming consoles, anti-shake camera and vibration detectors. This study represents liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET), in which inertial mass is not the only but also the conversion of mechanical movement to electric current signal is the main utilization of the ionic liquid. With silicon-based planar micro-fabrication, the device uses a sub-micron liter electrolyte droplet sealed in oil as the sensing body and a MET electrode arrangement which is the anode-cathode-cathode-anode (ACCA) in parallel as the read-out sensing part. In order to sensing the movement of ionic liquid, an imposed electric potential was applied between the anode and the cathode. The electrode reaction, I3-- + 2e-- ↔ 3I --, occurs around the cathode which is reverse at the anodes. Obviously, the current magnitude varies with the concentration of ionic liquid, which will be effected by the movement of liquid droplet as the inertial mass. With such structure, the promising performance of the MET device design is to achieve 10.8 V/G (G=9.81 m/s2) sensitivity at 20 Hz with the bandwidth from 1 Hz to 50 Hz, and a low noise floor of 100 microg/sqrt(Hz) at 20 Hz.

A Key Pre-Distribution Scheme Based on µ-PBIBD for Enhancing Resilience in Wireless Sensor Networks.

PubMed

Yuan, Qi; Ma, Chunguang; Yu, Haitao; Bian, Xuefen

2018-05-12

Many key pre-distribution (KPD) schemes based on combinatorial design were proposed for secure communication of wireless sensor networks (WSNs). Due to complexity of constructing the combinatorial design, it is infeasible to generate key rings using the corresponding combinatorial design in large scale deployment of WSNs. In this paper, we present a definition of new combinatorial design, termed “µ-partially balanced incomplete block design (µ-PBIBD)”, which is a refinement of partially balanced incomplete block design (PBIBD), and then describe a 2-D construction of µ-PBIBD which is mapped to KPD in WSNs. Our approach is of simple construction which provides a strong key connectivity and a poor network resilience. To improve the network resilience of KPD based on 2-D µ-PBIBD, we propose a KPD scheme based on 3-D Ex-µ-PBIBD which is a construction of µ-PBIBD from 2-D space to 3-D space. Ex-µ-PBIBD KPD scheme improves network scalability and resilience while has better key connectivity. Theoretical analysis and comparison with the related schemes show that key pre-distribution scheme based on Ex-µ-PBIBD provides high network resilience and better key scalability, while it achieves a trade-off between network resilience and network connectivity.

Mechanical stability of heat-treated nanoporous anodic alumina subjected to repetitive mechanical deformation

NASA Astrophysics Data System (ADS)

Bankova, A.; Videkov, V.; Tzaneva, B.; Mitov, M.

2018-03-01

We report studies on the mechanical response and deformation behavior of heat-treated nanoporous anodic alumina using a micro-balance test and experimental test equipment especially designed for this purpose. AAO samples were characterized mechanically by a three-point bending test using a micro-analytical balance. The deformation behavior was studied by repetitive mechanical bending of the AAO membranes using an electronically controlled system. The nanoporous AAO structures were prepared electrochemically from Al sheet substrates using a two-step anodizing technique in oxalic acid followed by heat treatment at 700 °C in air. The morphological study of the aluminum oxide layer after the mechanical tests and mechanical deformation was conducted using scanning electron and optical microscopy, respectively. The experimental results showed that the techniques proposed are simple and accurate; they could, therefore, be combined to constitute a method for mechanical stability assessment of nanostructured AAO films, which are important structural components in the design of MEMS devices and sensors.

Recent Development of Nanomaterial-Doped Conductive Polymers

NASA Astrophysics Data System (ADS)

Asyraf, Mohammad; Anwar, Mahmood; Sheng, Law Ming; Danquah, Michael K.

2017-12-01

Conductive polymers (CPs) have received significant research attention in material engineering for applications in microelectronics, micro-scale sensors, electromagnetic shielding, and micro actuators. Numerous research efforts have been focused on enhancing the conductivity of CPs by doping. Various conductive materials, such as metal nanoparticles and carbon-based nanoparticles, and structures, such as silver nanoparticles and graphene nanosheets, have been converted into polypyrrole and polypyrrole compounds as the precursors to developing hybrids, conjugates, or crystal nodes within the matrix to enhance the various structural properties, particularly the electrical conductivity. This article reviews nanomaterial doping of conductive polymers alongside technological advancements in the development and application of nanomaterial-doped polymeric systems. Emphasis is given to conductive nanomaterials such as nano-silver particles and carbon-based nanoparticles, graphene nano-sheets, fullerene, and carbon nanotubes (CNT) as dopants for polypyrrole-based CPs. The nature of induced electrical properties including electromagnetic absorption, electrical capacitance, and conductivities of polypyrrole systems is also discussed. The prospects and challenges associated with the development and application of CPs are also presented.

An approach to calculating metal particle detection in lubrication oil based on a micro inductive sensor

NASA Astrophysics Data System (ADS)

Wu, Yu; Zhang, Hongpeng

2017-12-01

A new microfluidic chip is presented to enhance the sensitivity of a micro inductive sensor, and an approach to coil inductance change calculation is introduced for metal particle detection in lubrication oil. Electromagnetic knowledge is used to establish a mathematical model of an inductive sensor for metal particle detection, and the analytic expression of coil inductance change is obtained by a magnetic vector potential. Experimental verification is carried out. The results show that copper particles 50-52 µm in diameter have been detected; the relative errors between the theoretical and experimental values are 7.68% and 10.02% at particle diameters of 108-110 µm and 50-52 µm, respectively. The approach presented here can provide a theoretical basis for an inductive sensor in metal particle detection in oil and other areas of application.

TOPICAL REVIEW: Organic light-emitting devices (OLEDs) and OLED-based chemical and biological sensors: an overview

NASA Astrophysics Data System (ADS)

Shinar, Joseph; Shinar, Ruth

2008-07-01

The basic photophysics, transport properties, state of the art, and challenges in OLED science and technology, and the major developments in structurally integrated OLED-based luminescent chemical and biological sensors are reviewed briefly. The dramatic advances in OLED performance have resulted in devices with projected continuous operating lifetimes of ~2 × 105 h (~23 yr) at ~150 Cd m-2 (the typical brightness of a computer monitor or TV). Consequently, commercial products incorporating OLEDs, e.g., cell phones, MP3 players, and, most recently, OLED TVs, are rapidly proliferating. The progress in elucidating the photophysics and transport properties, occurring in tandem with the development of OLEDs, has been no less dramatic. It has resulted in a detailed understanding of the dynamics of trapped and mobile negative and positive polarons (to which the electrons and holes, respectively, relax upon injection), and of singlet and triplet excitons. It has also yielded a detailed understanding of the spin dynamics of polarons and triplet excitons, which affects their overall dynamics significantly. Despite the aforementioned progress, there are outstanding challenges in OLED science and technology, notably in improving the efficiency of the devices and their stability at high brightness (>1000 Cd m-2). One of the most recent emerging OLED-based technologies is that of structurally integrated photoluminescence-based chemical and biological sensors. This sensor platform, pioneered by the authors, yields uniquely simple and potentially very low-cost sensor (micro)arrays. The second part of this review describes the recent developments in implementing this platform for gas phase oxygen, dissolved oxygen (DO), anthrax lethal factor, and hydrazine sensors, and for a DO, glucose, lactate, and ethanol multianalyte sensor.

Multimodal technique to eliminate humidity interference for specific detection of ethanol.

PubMed

Jalal, Ahmed Hasnain; Umasankar, Yogeswaran; Gonzalez, Pablo J; Alfonso, Alejandro; Bhansali, Shekhar

2017-01-15

Multimodal electrochemical technique incorporating both open circuit potential (OCP) and amperometric techniques have been conceptualized and implemented to improve the detection of specific analyte in systems where more than one analyte is present. This approach has been demonstrated through the detection of ethanol while eliminating the contribution of water in a micro fuel cell sensor system. The sensor was interfaced with LMP91000 potentiostat, controlled through MSP430F5529LP microcontroller to implement an auto-calibration algorithm tailored to improve the detection of alcohol. The sensor was designed and fabricated as a three electrode system with Nafion as a proton exchange membrane (PEM). The electrochemical signal of the interfering phase (water) was eliminated by implementing the multimodal electrochemical detection technique. The results were validated by comparing sensor and potentiostat performances with a commercial sensor and potentiostat respectively. The results suggest that such a sensing system can detect ethanol at concentrations as low as 5ppm. The structure and properties such as low detection limit, selectivity and miniaturized size enables potential application of this device in wearable transdermal alcohol measurements. Copyright © 2016 Elsevier B.V. All rights reserved.

Sensitivity Comparison of Vapor Trace Detection of Explosives Based on Chemo-Mechanical Sensing with Optical Detection and Capacitive Sensing with Electronic Detection

PubMed Central

Strle, Drago; Štefane, Bogdan; Zupanič, Erik; Trifkovič, Mario; Maček, Marijan; Jakša, Gregor; Kvasič, Ivan; Muševič, Igor

2014-01-01

The article offers a comparison of the sensitivities for vapour trace detection of Trinitrotoluene (TNT) explosives of two different sensor systems: a chemo-mechanical sensor based on chemically modified Atomic Force Microscope (AFM) cantilevers based on Micro Electro Mechanical System (MEMS) technology with optical detection (CMO), and a miniature system based on capacitive detection of chemically functionalized planar capacitors with interdigitated electrodes with a comb-like structure with electronic detection (CE). In both cases (either CMO or CE), the sensor surfaces are chemically functionalized with a layer of APhS (trimethoxyphenylsilane) molecules, which give the strongest sensor response for TNT. The construction and calibration of a vapour generator is also presented. The measurements of the sensor response to TNT are performed under equal conditions for both systems, and the results show that CE system with ultrasensitive electronics is far superior to optical detection using MEMS. Using CMO system, we can detect 300 molecules of TNT in 10+12 molecules of N2 carrier gas, whereas the CE system can detect three molecules of TNT in 10+12 molecules of carrier N2. PMID:24977388

Quaternion-Based Unscented Kalman Filter for Accurate Indoor Heading Estimation Using Wearable Multi-Sensor System

PubMed Central

Yuan, Xuebing; Yu, Shuai; Zhang, Shengzhi; Wang, Guoping; Liu, Sheng

2015-01-01

Inertial navigation based on micro-electromechanical system (MEMS) inertial measurement units (IMUs) has attracted numerous researchers due to its high reliability and independence. The heading estimation, as one of the most important parts of inertial navigation, has been a research focus in this field. Heading estimation using magnetometers is perturbed by magnetic disturbances, such as indoor concrete structures and electronic equipment. The MEMS gyroscope is also used for heading estimation. However, the accuracy of gyroscope is unreliable with time. In this paper, a wearable multi-sensor system has been designed to obtain the high-accuracy indoor heading estimation, according to a quaternion-based unscented Kalman filter (UKF) algorithm. The proposed multi-sensor system including one three-axis accelerometer, three single-axis gyroscopes, one three-axis magnetometer and one microprocessor minimizes the size and cost. The wearable multi-sensor system was fixed on waist of pedestrian and the quadrotor unmanned aerial vehicle (UAV) for heading estimation experiments in our college building. The results show that the mean heading estimation errors are less 10° and 5° to multi-sensor system fixed on waist of pedestrian and the quadrotor UAV, respectively, compared to the reference path. PMID:25961384

Micro/Nanofibre Optical Sensors: Challenges and Prospects

PubMed Central

Tong, Limin

2018-01-01

Micro/nanofibres (MNFs) are optical fibres with diameters close to or below the vacuum wavelength of visible or near-infrared light. Due to its wavelength- or sub-wavelength scale diameter and relatively large index contrast between the core and cladding, an MNF can offer engineerable waveguiding properties including optical confinement, fractional evanescent fields and surface intensity, which is very attractive to optical sensing on the micro and nanometer scale. In particular, the waveguided low-loss tightly confined large fractional evanescent fields, enabled by atomic level surface roughness and extraordinary geometric and material uniformity in a glass MNF, is one of its most prominent merits in realizing optical sensing with high sensitivity and great versatility. Meanwhile, the mesoporous matrix and small diameter of a polymer MNF, make it an excellent host fibre for functional materials for fast-response optical sensing. In this tutorial, we first introduce the basics of MNF optics and MNF optical sensors, and review the progress and current status of this field. Then, we discuss challenges and prospects of MNF sensors to some extent, with several clues for future studies. Finally, we conclude with a brief outlook for MNF optical sensors.

Hybrid optical security system using photonic crystals and MEMS devices

NASA Astrophysics Data System (ADS)

Ciosek, Jerzy; Ostrowski, Roman

2017-10-01

An important issue in security systems is that of selection of the appropriate detectors or sensors, whose sensitivity guarantees functional reliability whilst avoiding false alarms. Modern technology enables the optimization of sensor systems, tailored to specific risk factors. In optical security systems, one of the safety parameters considered is the spectral range in which the excitation signal is associated with a risk factor. Advanced safety systems should be designed taking into consideration the possible occurrence of, often multiple, complex risk factors, which can be identified individually. The hazards of concern in this work are chemical warfare agents and toxic industrial compounds present in the forms of gases and aerosols. The proposed sensor solution is a hybrid optical system consisting of a multi-spectral structure of photonic crystals associated with a MEMS (Micro Electro-Mechanical System) resonator. The crystallographic structures of carbon present in graphene rings and graphenecarbon nanotube nanocomposites have properties which make them desirable for use in detectors. The advantage of this system is a multi-spectral sensitivity at the same time as narrow-band selectivity for the identification of risk factors. It is possible to design a system optimized for detecting specified types of risk factor from very complex signals.

Comparing success levels of different neural network structures in extracting discriminative information from the response patterns of a temperature-modulated resistive gas sensor

NASA Astrophysics Data System (ADS)

Hosseini-Golgoo, S. M.; Bozorgi, H.; Saberkari, A.

2015-06-01

Performances of three neural networks, consisting of a multi-layer perceptron, a radial basis function, and a neuro-fuzzy network with local linear model tree training algorithm, in modeling and extracting discriminative features from the response patterns of a temperature-modulated resistive gas sensor are quantitatively compared. For response pattern recording, a voltage staircase containing five steps each with a 20 s plateau is applied to the micro-heater of the sensor, when 12 different target gases, each at 11 concentration levels, are present. In each test, the hidden layer neuron weights are taken as the discriminatory feature vector of the target gas. These vectors are then mapped to a 3D feature space using linear discriminant analysis. The discriminative information content of the feature vectors are determined by the calculation of the Fisher’s discriminant ratio, affording quantitative comparison among the success rates achieved by the different neural network structures. The results demonstrate a superior discrimination ratio for features extracted from local linear neuro-fuzzy and radial-basis-function networks with recognition rates of 96.27% and 90.74%, respectively.

Formaldehyde gas sensor based on TiO2 thin membrane integrated with nano silicon structure

NASA Astrophysics Data System (ADS)

Zheng, Xuan; Ming, An-jie; Ye, Li; Chen, Feng-hua; Sun, Xi-long; Liu, Wei-bing; Li, Chao-bo; Ou, Wen; Wang, Wei-bing; Chen, Da-peng

2016-07-01

An innovative formaldehyde gas sensor based on thin membrane type metal oxide of TiO2 layer was designed and fabricated. This sensor under ultraviolet (UV) light emitting diode (LED) illumination exhibits a higher response to formaldehyde than that without UV illumination at low temperature. The sensitivities of the sensor under steady working condition were calculated for different gas concentrations. The sensitivity to formaldehyde of 7.14 mg/m3 is about 15.91 under UV illumination with response time of 580 s and recovery time of 500 s. The device was fabricated through micro-electro-mechanical system (MEMS) processing technology. First, plasma immersion ion implantation (PIII) was adopted to form black polysilicon, then a nanoscale TiO2 membrane with thickness of 53 nm was deposited by DC reactive magnetron sputtering to obtain the sensing layer. By such fabrication approaches, the nanoscale polysilicon presents continuous rough surface with thickness of 50 nm, which could improve the porosity of the sensing membrane. The fabrication process can be mass-produced for the MEMS process compatibility.

Wild life passer species recognition from a technical passage through data fusion of a wireless sensor network

NASA Astrophysics Data System (ADS)

Gazis, A.; Katsiri, E.

2017-09-01

This paper presents a Wireless Sensor Network (WSN) system which was created as a project about protecting wildlife using sensor networks following the assistance of the department of Electrical and Computer Engineering of the Democritus University of Thrace. An automated process was implemented, regarding the recognition of a passenger (ie human, wolf, bear, etc.) traversing a box-shaped underground passage, such as the ones located along main highways fusing Width, Height and Weight values. These were measured using low-cost distance (beam) and weight (S-type load) micro-sensors and stored in a central repository. Moreover, the information provided by the WSN was analyzed, via a variety of methods including a neural pattern recognition network as well as clustering algorithms, which were able to recognize the kind of passenger, with certainty scores over 90%. The main concern, regarding the future, is the evaluation of these passages in respect to their effectiveness, i.e. whether they are frequently utilized by animals. This information was further analysed by appropriate information systems, in order to provide insights about the effectiveness of such mitigation structures.

Characterization of silicon micro-strip sensors with a pulsed infra-red laser system for the CBM experiment at FAIR

NASA Astrophysics Data System (ADS)

Ghosh, P.

2015-03-01

The Compressed Baryonic Matter (CBM) experiment at FAIR is composed of 8 tracking stations consisting of 1292 double sided silicon micro-strip sensors. For the quality assurance of produced prototype sensors a laser test system (LTS) has been developed. The aim of the LTS is to scan sensors with a pulsed infra-red laser driven by step motor to determine the charge sharing in-between strips and to measure qualitative uniformity of the sensor response over the whole active area. The prototype sensors which are tested with the LTS so far have 256 strips with a pitch of 50 μm on each side. They are read-out using a self-triggering prototype read-out electronic ASIC called n-XYTER. The LTS is designed to measure sensor response in an automatized procedure at several thousand positions across the sensor with focused infra-red laser light (spot size ≈ 12 μm , wavelength = 1060 nm). The pulse with duration (≈ 10 ns) and power (≈ 5 mW) of the laser pulses is selected such, that the absorption of the laser light in the 300 μm thick silicon sensors produces a number of about 24000 electrons, which is similar to the charge created by minimum ionizing particles (MIP) in these sensors. Laser scans different prototype sensors is reported.

Image Reconstruction Under Contact Impedance Effect in Micro Electrical Impedance Tomography Sensors.

PubMed

Liu, Xiayi; Yao, Jiafeng; Zhao, Tong; Obara, Hiromichi; Cui, Yahui; Takei, Masahiro

2018-06-01

Contact impedance has an important effect on micro electrical impedance tomography (EIT) sensors compared to conventional macro sensors. In the present work, a complex contact impedance effect ratio ξ is defined to quantitatively evaluate the effect of the contact impedance on the accuracy of the reconstructed images by micro EIT. Quality of the reconstructed image under various ξ is estimated by the phantom simulation to find the optimum algorithm. The generalized vector sampled pattern matching (GVSPM) method reveals the best image quality and the best tolerance to ξ. Moreover, the images of yeast cells sedimentary distribution in a multilayered microchannel are reconstructed by the GVSPM method under various mean magnitudes of contact impedance effect ratio |ξ|. The result shows that the best image quality that has the smallest voltage error U E = 0.581 is achieved with measurement frequency f = 1 MHz and mean magnitude |ξ| = 26. In addition, the reconstructed images of cells distribution become improper while f < 10 kHz and mean value of |ξ| > 2400.

A sensitive and innovative detection method for rapid C-reactive proteins analysis based on a micro-fluxgate sensor system

PubMed Central

Yang, Zhen; Zhi, Shaotao; Feng, Zhu; Lei, Chong; Zhou, Yong

2018-01-01

A sensitive and innovative assay system based on a micro-MEMS-fluxgate sensor and immunomagnetic beads-labels was developed for the rapid analysis of C-reactive proteins (CRP). The fluxgate sensor presented in this study was fabricated through standard micro-electro-mechanical system technology. A multi-loop magnetic core made of Fe-based amorphous ribbon was employed as the sensing element, and 3-D solenoid copper coils were used to control the sensing core. Antibody-conjugated immunomagnetic microbeads were strategically utilized as signal tags to label the CRP via the specific conjugation of CRP to polyclonal CRP antibodies. Separate Au film substrates were applied as immunoplatforms to immobilize CRP-beads labels through classical sandwich assays. Detection and quantification of the CRP at different concentrations were implemented by detecting the stray field of CRP labeled magnetic beads using the newly-developed micro-fluxgate sensor. The resulting system exhibited the required sensitivity, stability, reproducibility, and selectivity. A detection limit as low as 0.002 μg/mL CRP with a linearity range from 0.002 μg/mL to 10 μg/mL was achieved, and this suggested that the proposed biosystem possesses high sensitivity. In addition to the extremely low detection limit, the proposed method can be easily manipulated and possesses a quick response time. The response time of our sensor was less than 5 s, and the entire detection period for CRP analysis can be completed in less than 30 min using the current method. Given the detection performance and other advantages such as miniaturization, excellent stability and specificity, the proposed biosensor can be considered as a potential candidate for the rapid analysis of CRP, especially for point-of-care platforms. PMID:29601593

Micro-LiDAR velocity, temperature, density, concentration sensor

NASA Technical Reports Server (NTRS)

Dorrington, Adrian A. (Inventor); Danehy, Paul M. (Inventor)

2010-01-01

A light scatter sensor includes a sensor body in which are positioned a plurality of optical fibers. The sensor body includes a surface, in one end of each of the optical fibers terminates at the surface of the sensor body. One of the optical fibers is an illumination fiber for emitting light. A plurality of second optical fibers are collection fibers for collecting scattered light signals. A light sensor processor is connected to the collection fibers to detect the scattered light signals.

Fully additive manufacture of a polymer cantilever with an embedded functional layer

NASA Astrophysics Data System (ADS)

Kanazawa, Shusuke; Kusaka, Yasuyuki; Horii, Yoshinori; Ushijima, Hirobumi

2018-03-01

In this paper, we report on an efficient and unique printing-based process for fabricating a cantilever structure with an embedded functional layer. The process is used to form a micro suspended structure via the one-batch transfer of stacked layers from a dummy substrate. The mechanism of the transfer process is clearly explained by the order of adhesion strengths of all interfaces. As a demonstration, a strain gauge which consisted of a polymer cantilever with an embedded conductive wire was successfully fabricated. It is expected that the proposed process will widely contribute to the efficient manufacture of useful sensors and actuators.

Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

NASA Astrophysics Data System (ADS)

Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

2013-09-01

This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

Temperature characteristics research of SOI pressure sensor based on asymmetric base region transistor

NASA Astrophysics Data System (ADS)

Zhao, Xiaofeng; Li, Dandan; Yu, Yang; Wen, Dianzhong

2017-07-01

Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type silicon cup and a Wheatstone bridge with four piezoresistors ({R}1, {R}2, {R}3 and {R}4) locating on the edge of a square silicon membrane. The chip was designed and fabricated on a silicon on insulator (SOI) wafer by micro electromechanical system (MEMS) technology and bipolar transistor process. When the supply voltage is 5.0 V, the corresponding temperature coefficient of the sensitivity (TCS) for the sensor before and after temperature compensation are -1862 and -1067 ppm/°C, respectively. Through varying the ratio of the base region resistances {r}1 and {r}2, the TCS for the sensor with the compensation circuit is -127 ppm/°C. It is possible to use this compensation circuit to improve the temperature characteristics of the pressure sensor. Project supported by the National Natural Science Foundation of China (No. 61471159), the Natural Science Foundation of Heilongjiang Province (No. F201433), the University Nursing Program for Young Scholars with Creative Talents in Heilongjiang Province (No. 2015018), and the Special Funds for Science and Technology Innovation Talents of Harbin in China (No. 2016RAXXJ016).

Micro packaged MEMS pressure sensor for intracranial pressure measurement

NASA Astrophysics Data System (ADS)

Xiong, Liu; Yan, Yao; Jiahao, Ma; Yanhang, Zhang; Qian, Wang; Zhaohua, Zhang; Tianling, Ren

2015-06-01

This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Miniaturization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa. Project supported by the National Natural Science Foundation of China (Nos. 61025021, 61434001), and the ‘Thousands Talents’ Program for Pioneer Researchers and Its Innovation Team, China.

Analysis of the reflection of a micro drop fiber sensor

NASA Astrophysics Data System (ADS)

Sun, Weimin; Liu, Qiang; Zhao, Lei; Li, Yingjuan; Yuan, Libo

2005-01-01

Micro drop fiber sensors are effective tools for measuring characters of liquids. These types of sensors are wildly used in biotechnology, beverage and food markets. For a fiber micro drop sensor, the signal of the output light is wavy with two peaks, normally. Carefully analyzing the wavy process can identify the liquid components. Understanding the reason of forming this wavy signal is important to design a suitable sensing head and to choose a suitable signal-processing method. The dripping process of a type of liquids is relative to the characters of the liquid and the shape of the sensing head. The quasi-Gauss model of the light field from the input-fiber end is used to analyse the distribution of the light field in the liquid drop. In addition, considering the characters of the liquid to be measured, the dripping process of the optical signal from the output-fiber end can be expected. The reflection surface of the micro drop varies as serials of spheres with different radiuses and global centers. The intensity of the reflection light changes with the shape of the surface. The varying process of the intensity relates to the tense, refractive index, transmission et al. To support the analyse above, an experimental system is established. In the system, LED is chosen as the light source and the PIN transform the light signal to the electrical signal, which is collected by a data acquisition card. An on-line testing system is made to check the theory discussed above.

Agarose coated spherical micro resonator for humidity measurements.

PubMed

Mallik, Arun Kumar; Liu, Dejun; Kavungal, Vishnu; Wu, Qiang; Farrell, Gerald; Semenova, Yuliya

2016-09-19

A new type of fiber optic relative humidity (RH) sensor based on an agarose coated silica microsphere resonator is proposed and experimentally demonstrated. Whispering gallery modes (WGMs) in the micro resonator are excited by evanescent coupling using a tapered fiber with ~3.3 µm waist diameter. A change in the relative humidity of the surrounding the resonator air induces changes in the refractive index (RI) and thickness of the Agarose coating layer. These changes in turn lead to a spectral shift of the WGM resonances, which can be related to the RH value after a suitable calibration. Studies of the repeatability, long-term stability, measurement accuracy and temperature dependence of the proposed sensor are carried out. The RH sensitivity of the proposed sensor depends on the concentration of the agarose gel which determines the initial thickness of the deposited coating layer. Studies of the micro- resonators with coating layers fabricated from gels with three different Agarose concentrations of 0.5%, 1.125% and 2.25 wt./vol.% showed that an increase in the initial thickness of the coating material results in an increase in sensitivity but also leads to a decrease of quality factor (Q) of the micro resonator. The highest sensitivity achieved in our experiments was 518 pm/%RH in the RH range from 30% to 70%. The proposed sensor offers the advantages of a very compact form factor, low hysteresis, good repeatability, and low cross sensitivity to temperature.

Wireless and chip-less passive radiation sensors for high dose monitoring

DOE Office of Scientific and Technical Information (OSTI.GOV)

Debourg, E.; Aubert, H.; Pons, P.

The safety of nuclear infrastructures may involve the monitoring of many parameters in harsh environments (high radiation level, high temperature, high pressure,..). If technological solutions exist for transducers part in such environments, the electronic part used in reader is not appropriate and still a challenging task. Well-known solutions to remove the electronic part from the harsh environment consist of connecting the transducer and the reader by long electrical wires or performing ex situ remote sensing. However wires may practically be difficult to implement while ex situ measurements are not compatible with on line monitoring. Wireless and passive sensors working inmore » harsh environments could be an appropriate solution for the remote sensing of critical parameters. Passive sensors without electronics in the sensing unit are available (e.g., SAW sensors) but they suffer from short reading range (typically lower than 10 meters). In order to overcome this range limitation a new class of electromagnetic transducers was developed in the mid-2000's. The operating principle is based on the modification of the properties of high-frequency (>> 1 GHz) passive electromagnetic devices by the quantity to be measured. Based on this principle a wide range of sensing properties can be addressed and a large number of materials can be chosen. Moreover the use of high frequency allows reducing the size of the sensor elements (antenna, transducer) and enhancing the immunity to multi-path. Several principles of RF transducers have been already validated by LAAS-CNRS (e;g; pressure, temperature, stress) as well as radar-based solution for the wireless long-range sensors interrogation. The sensor dosimeter exploit here the known property of Hydrogen-Pressure Dosimeters (HPD) for which the polymer material dehydrogenates under nuclear irradiation. The transducer principle is described. The irradiation will generate the out-gazing (hydrogen) of the polymer inside a micro-chamber. The resulting overpressure leads to the deflection of a silicon membrane which modifies the resonant frequency of the RF resonator. Tests structures have been designed in order to quantify the HDPE out-gazing inside a micro-cavity by measuring the deflection of a boss silicon membrane with a mechanical profiler. A specific set up using interferometry method has been also developed to evaluate the pressure generated inside the micro-cavity. The procedure consists in applying a pressure that pushes the membrane to recover a flat membrane. This condition is monitored thanks to the extinction of the Newton rings. Irradiations have been performed up to 30 kGy using 6 MeV focused e-beam providing by electron accelerator. Membrane deflection and generated pressure around 0.2 μm/mg{sub HDPE}/kGy and 70 mbar/mg{sub HDPE}/kGy has been obtained for a 70 μm thick membrane. In order to characterize the hermetic sealing of the micro-chamber under hydrogen over-pressure, membrane deflection after irradiation has been recorded during 50 days. The variations of membrane deflection are randomly distributed and generally lower than ±5%, showing a good hermeticity during this period. (authors)« less

Carbon nanotubes based methanol sensor for fuel cells application.

PubMed

Kim, D W; Lee, J S; Lee, G S; Overzet, L; Kozlov, M; Aliev, A E; Park, Y W; Yang, D J

2006-11-01

An electrochemical sensor is built using vertically grown multi-walled carbon nanotubes (MWNTs) micro-array to detect methanol concentration in water. This study is done for the potential use of the array as methanol sensor for portable units of direct methanol fuel cells (DMFCs). Platinum (Pt) nanoparticles electro-deposited CNTs (Pt/CNTs) electrode shows high sensitivity in the measurement of methanol concentration in water with cyclic voltammetry (CV) measurement at room temperature. Further investigation has also been undertaken to measure the concentration by changing the amount of the mixture of methanol and formic acid in water. We compared the performance of our micro array sensor built with Pt/CNTs electrodes versus that of Pt wire electrode using CV measurement. We found that our Pt/CNTs array sensor shows high sensitivity and detects methanol concentrations in the range of 0.04 M to 0.10 M. In addition, we found that co-use of formic acid as electrolyte enables us to measure up to 1.0 M methanol concentration.

Research and Development on In-Situ Measurement Sensors for Micro-Meteoroid and Small Space Debris at JAXA

NASA Astrophysics Data System (ADS)

Kitazawa, Y.; Matsumoto, H.; Okudaira, O.; Kimoto, Y.; Hanada, T.; Faure, P.; Akahoshi, Y.; Hattori, M.; Karaki, A.; Sakurai, A.; Funakoshi, K.; Yasaka, T.

2013-08-01

The Japan Aerospace Exploration Agency (JAXA) has been conducting R&D into in-situ sensors for measuring micro-meteoroid and small-sized debris (MMSD) since the 1980s. Research into active sensors started with the meteoroid observation experiment conducted using the HITEN (MUSES-A) satellite that ISAS/JAXA launched in 1990. The main purpose behind the start of passive collector research was SOCCER, a late-80s Japan-US mission that was designed to capture cometary dust and then return to the Earth. Although this mission was cancelled, the research outcomes were employed in a JAXA mission for the return of MMSD samples using calibrated aerogel and involving the space shuttle and the International Space Station. Many other important activities have been undertaken as well, and the knowledge they have generated has contributed to JAXA's development of a new type of active dust sensor. This paper reports on the R&D conducted at JAXA into in-situ MMSD measurement sensors.

Marker-Based Multi-Sensor Fusion Indoor Localization System for Micro Air Vehicles.

PubMed

Xing, Boyang; Zhu, Quanmin; Pan, Feng; Feng, Xiaoxue

2018-05-25

A novel multi-sensor fusion indoor localization algorithm based on ArUco marker is designed in this paper. The proposed ArUco mapping algorithm can build and correct the map of markers online with Grubbs criterion and K-mean clustering, which avoids the map distortion due to lack of correction. Based on the conception of multi-sensor information fusion, the federated Kalman filter is utilized to synthesize the multi-source information from markers, optical flow, ultrasonic and the inertial sensor, which can obtain a continuous localization result and effectively reduce the position drift due to the long-term loss of markers in pure marker localization. The proposed algorithm can be easily implemented in a hardware of one Raspberry Pi Zero and two STM32 micro controllers produced by STMicroelectronics (Geneva, Switzerland). Thus, a small-size and low-cost marker-based localization system is presented. The experimental results show that the speed estimation result of the proposed system is better than Px4flow, and it has the centimeter accuracy of mapping and positioning. The presented system not only gives satisfying localization precision, but also has the potential to expand other sensors (such as visual odometry, ultra wideband (UWB) beacon and lidar) to further improve the localization performance. The proposed system can be reliably employed in Micro Aerial Vehicle (MAV) visual localization and robotics control.

Grasping Force Control for a Robotic Hand by Slip Detection Using Developed Micro Laser Doppler Velocimeter

PubMed Central

Nogami, Hirofumi; Higurashi, Eiji; Sawada, Renshi

2018-01-01

The purpose of this paper is to show the feasibility of grasping force control by feeding back signals of the developed micro-laser Doppler velocimeter (μ-LDV) and by discriminating whether a grasped object is slipping or not. LDV is well known as a high response surface velocity sensor which can measure various surfaces—such as metal, paper, film, and so on—thus suggesting the potential application of LDV as a slip sensor for grasping various objects. However, the use of LDV as a slip sensor has not yet been reported because the size of LDVs is too large to be installed on a robotic fingertip. We have solved the size problem and enabled the performance of a feasibility test with a few-millimeter-scale LDV referred to as micro-LDV (μ-LDV) by modifying the design which was adopted from MEMS (microelectromechanical systems) fabrication process. In this paper, by applying our developed μ-LDV as a slip sensor, we have successfully demonstrated grasping force control with three target objects—aluminum block, wood block, and white acrylic block—considering that various objects made of these materials can be found in homes and factories, without grasping force feedback. We provide proofs that LDV is a new promising candidate slip sensor for grasping force control to execute target grasping. PMID:29360799

SMART micro-scissors with dual motors and OCT sensors (Conference Presentation)

NASA Astrophysics Data System (ADS)

Yeo, Chaebeom; Jang, Seonjin; Park, Hyun-cheol; Gehlbach, Peter L.; Song, Cheol

2017-02-01

Various end-effectors of microsurgical instruments have been developed and studied. Also, many approaches to stabilize the tool-tip using robotics have been studied such as the steady hand robot system, Micron, and SMART system. In our previous study, the horizontal SMART micro-scissors with a common path swept source OCT distance and one linear piezoelectric (PZT) motor was demonstrated as a microsurgical system. Because the outer needle is connected with a mechanical handle and moved to engage the tool tip manually, the tool tip position is instantaneously changed during the engaging. The undesirable motion can make unexpected tissue damages and low surgical accuracy. In this study, we suggest a prototype horizontal SMART micro-scissors which has dual OCT sensors and two motors to improve the tremor cancellation. Dual OCT sensors provide two distance information. Front OCT sensor detects a distance from the sample surface to the tool tip. Rear OCT sensors gives current PZT motor movement, acting like a motor encoder. The PZT motor can compensate the hand tremor with a feedback loop control. The manual engaging of tool tip in previous SMART system is replaced by electrical engaging using a squiggle motor. Compared with previous study, this study showed better performance in the hand tremor reduction. From the result, the SMART with automatic engaging may become increasingly valuable in microsurgical instruments.

Mobile micro-colorimeter and micro-spectrometer sensor modules as enablers for the replacement of subjective inspections by objective measurements for optically clear colored liquids in-field

NASA Astrophysics Data System (ADS)

Dittrich, Paul-Gerald; Grunert, Fred; Ehehalt, Jörg; Hofmann, Dietrich

2015-03-01

Aim of the paper is to show that the colorimetric characterization of optically clear colored liquids can be performed with different measurement methods and their application specific multichannel spectral sensors. The possible measurement methods are differentiated by the applied types of multichannel spectral sensors and therefore by their spectral resolution, measurement speed, measurement accuracy and measurement costs. The paper describes how different types of multichannel spectral sensors are calibrated with different types of calibration methods and how the measurement values can be used for further colorimetric calculations. The different measurement methods and the different application specific calibration methods will be explained methodically and theoretically. The paper proofs that and how different multichannel spectral sensor modules with different calibration methods can be applied with smartpads for the calculation of measurement results both in laboratory and in field. A given practical example is the application of different multichannel spectral sensors for the colorimetric characterization of petroleum oils and fuels and their colorimetric characterization by the Saybolt color scale.

Geometry optimization for micro-pressure sensor considering dynamic interference

NASA Astrophysics Data System (ADS)

Yu, Zhongliang; Zhao, Yulong; Li, Lili; Tian, Bian; Li, Cun

2014-09-01

Presented is the geometry optimization for piezoresistive absolute micro-pressure sensor. A figure of merit called the performance factor (PF) is defined as a quantitative index to describe the comprehensive performances of a sensor including sensitivity, resonant frequency, and acceleration interference. Three geometries are proposed through introducing islands and sensitive beams into typical flat diaphragm. The stress distributions of sensitive elements are analyzed by finite element method. Multivariate fittings based on ANSYS simulation results are performed to establish the equations about surface stress, deflection, and resonant frequency. Optimization by MATLAB is carried out to determine the dimensions of the geometries. Convex corner undercutting is evaluated. Each PF of the three geometries with the determined dimensions is calculated and compared. Silicon bulk micromachining is utilized to fabricate the prototypes of the sensors. The outputs of the sensors under both static and dynamic conditions are tested. Experimental results demonstrate the rationality of the defined performance factor and reveal that the geometry with quad islands presents the highest PF of 210.947 Hz1/4. The favorable overall performances enable the sensor more suitable for altimetry.

Research and Development on In-Situ Measurement Sensors for Micro-Meteoroid and Small Space Debris at JAXA

NASA Astrophysics Data System (ADS)

Kitazawa, Yukihito; Matsumoto, Haruhisa; Okudaira, Osamu; Kimoto, Yugo; Hanada, Toshiya; Akahoshi, Yasuhiro; Pauline, Faure; Sakurai, Akira; Funakoshi, Kunihiro; Yasaka, Testuo

2015-04-01

The history of Japanese R&D into in-situ sensors for micro-meteoroid and orbital debris (MMOD) measurements is neither particularly long nor short. Research into active sensors started for the meteoroid observation experiment on the HITEN (MUSES-A) satellite of ISAS/JAXA launched in 1990, which had MDC (Munich Dust Counter) on-board sensors for micro meteoroid measurement. This was a collaboration between Technische Universität München and ISAS/JAXA. The main purpose behind the start of passive sensor research was SOCCOR, a late 80's Japan-US mission that planned to capture cometary dust and return to the Earth. Although this mission was canceled, the research outcomes were employed in a JAXA micro debris sample return mission using calibrated aerogel involving the Space Shuttle and the International Space Station. There have been many other important activities apart from the above, and the knowledge generated from them has contributed to JAXA's development of a new type of active dust sensor. JAXA and its partners have been developing a simple in-situ active dust sensor of a new type to detect dust particles ranging from a hundred micrometers to several millimeters. The distribution and flux of the debris in the size range are not well understood and is difficult to measure using ground observations. However, it is important that the risk caused by such debris is assessed. In-situ measurement of debris in this size range is useful for 1) verifying meteoroid and debris environment models, 2) verifying meteoroid and debris environment evolution models, and 3) the real time detection of explosions, collisions and other unexpected orbital events. Multitudes of thin, conductive copper strips are formed at a fine pitch of 100 um on a film 12.5 um thick of nonconductive polyimide. An MMOD particle impact is detected when one or more strips are severed by being perforated by such an impact. This sensor is simple to produce and use and requires almost no calibration as it is essentially a digital system. Based on this sensor technology, the Kyushu Institute of Technology (Kyutech) has designed and developed an educational version of the sensor, which is currently on board the nano-satellite Horyu-II, which was built at Kyutech and launched on May 18, 2012 by JAXA. Although the sensor has a very small sensing area, sensor data were nonetheless successfully received. Moreover, a laboratory version of the sensor fitted on QSAT-EOS ("Tsukushi"), a small satellite, was be launched in November 2014. This version was developed and manufactured by Japan's QPS Institute to evaluate the sensor's capability regarding hypervelocity impact experiments at JAXA. JAXA's flight version, to be employed on satellites and/or the ISS, will be ready soon and a flight demonstration will be conducted on KOUNOTORI (HTV) in 2015. This paper reports on the R&D into in-situ measurement MMOD sensors at JAXA.

Optical micro resonance based sensor schemes for detection and identification of nano particles and biological agents in situ

NASA Astrophysics Data System (ADS)

Saetchnikov, Vladimir A.; Tcherniavskaia, Elina A.; Schweiger, Gustav; Ostendorf, Andreas

2010-05-01

A novel emerging technique for the label-free analysis of nano particles including biomolecules using optical micro cavity resonance is being developed. Various schemes based on a mechanically fixed microspheres as well as microspheres melted by laser on the tip of a standard single mode fiber have been investigated to make further development for microbial application. Water solutions of ethanol, HCl, glucose, vitamin C and biotin have been used to test refractive index changes by monitoring the magnitude of the whispering gallery modes spectral shift. Particular efforts were made for effective fixing of the micro spheres in the water flow, an optimal geometry for micro resonance observation and material of microsphere the most appropriate for microbial application. Optical resonance in free micro spheres from PMMA fixed in micro channels produced by photolithography has been observed under the laser power of less then 1 microwatt. Resonance shifts of C reactive protein water solutions as well as albumin solutions in pure water and with HCl modelling blood have been investigated. Introducing controlled amount of glass gel nano particles into sensor microsphere surrounding were accompanied by both correlative resonance shift (400 nm in diameter) and total reconstruct of resonance spectra (57 nm in diameter). Developed schemes have been demonstrated to be a promising technology platform for sensitive, lab-on-chip type sensor of diagnostic tools for different biological molecules, e.g. proteins, oligonucleotides, oligosaccharides, lipids, small molecules, viral particles, cells as well as in different experimental contexts e.g. proteomics, genomics, drug discovery, and membrane studies.

Perovskite LaBaCo2O5+δ (LBCO) single-crystal thin films for pressure sensing applications

NASA Astrophysics Data System (ADS)

Ma, Y. J.; Xiao, J. Y.; Zhang, Q. Y.; Ma, C. Y.; Jiang, X. N.; Wu, B. Y.; Zeng, X. Y.

2018-04-01

Perovskite LaBaCo2O5+δ (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 μm, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 × 10-2 to 105 Pa with a real dynamic range of 3 to 2 × 103 Pa.

Autonomous Mobile Platform for Research in Cooperative Robotics

NASA Technical Reports Server (NTRS)

Daemi, Ali; Pena, Edward; Ferguson, Paul

1998-01-01

This paper describes the design and development of a platform for research in cooperative mobile robotics. The structure and mechanics of the vehicles are based on R/C cars. The vehicle is rendered mobile by a DC motor and servo motor. The perception of the robot's environment is achieved using IR sensors and a central vision system. A laptop computer processes images from a CCD camera located above the testing area to determine the position of objects in sight. This information is sent to each robot via RF modem. Each robot is operated by a Motorola 68HC11E micro-controller, and all actions of the robots are realized through the connections of IR sensors, modem, and motors. The intelligent behavior of each robot is based on a hierarchical fuzzy-rule based approach.

Lab-on-CMOS Integration of Microfluidics and Electrochemical Sensors

PubMed Central

Huang, Yue; Mason, Andrew J.

2013-01-01

This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms. PMID:23939616

Lab-on-CMOS integration of microfluidics and electrochemical sensors.

PubMed

Huang, Yue; Mason, Andrew J

2013-10-07

This paper introduces a CMOS-microfluidics integration scheme for electrochemical microsystems. A CMOS chip was embedded into a micro-machined silicon carrier. By leveling the CMOS chip and carrier surface to within 100 nm, an expanded obstacle-free surface suitable for photolithography was achieved. Thin film metal planar interconnects were microfabricated to bridge CMOS pads to the perimeter of the carrier, leaving a flat and smooth surface for integrating microfluidic structures. A model device containing SU-8 microfluidic mixers and detection channels crossing over microelectrodes on a CMOS integrated circuit was constructed using the chip-carrier assembly scheme. Functional integrity of microfluidic structures and on-CMOS electrodes was verified by a simultaneous sample dilution and electrochemical detection experiment within multi-channel microfluidics. This lab-on-CMOS integration process is capable of high packing density, is suitable for wafer-level batch production, and opens new opportunities to combine the performance benefits of on-CMOS sensors with lab-on-chip platforms.

Community Seismic Network (CSN)

NASA Astrophysics Data System (ADS)

Clayton, R. W.; Heaton, T. H.; Kohler, M. D.; Chandy, M.; Krause, A.

2010-12-01

In collaboration with computer science and earthquake engineering, we are developing a dense network of low-cost accelerometers that send their data via the Internet to a cloud-based center. The goal is to make block-by-block measurements of ground shaking in urban areas, which will provide emergency response information in the case of large earthquakes, and an unprecedented high-frequency seismic array to study structure and the earthquake process with moderate shaking. When deployed in high-rise buildings they can be used to monitor the state of health of the structure. The sensors are capable of a resolution of approximately 80 micro-g, connect via USB ports to desktop computers, and cost about $100 each. The network will adapt to its environment by using network-wide machine learning to adjust the picking sensitivity. We are also looking into using other motion sensing devices such as cell phones. For a pilot project, we plan to deploy more than 1000 sensors in the greater Pasadena area. The system is easily adaptable to other seismically vulnerable urban areas.

Recent advances in metamaterial split-ring-resonator circuits as biosensors and therapeutic agents.

PubMed

RoyChoudhury, Sohini; Rawat, Vaishali; Jalal, Ahmed Hasnain; Kale, S N; Bhansali, Shekhar

2016-12-15

Potential applications of thin film metamaterials are diverse and their realization to offer miniaturized waveguides, antennas and shielding patterns are on anvil. These artificially engineered structures can produce astonishing electromagnetic responses because of their constituents being engineered at much smaller dimensions than the wavelength of the incident electromagnetic wave, hence behaving as artificial materials. Such micro-nano dimensions of thin film metamaterial structures can be customized for various applications due to their exclusive responses to not only electromagnetic, but also to acoustic and thermal waves that surpass the natural materials' properties. In this paper, the recent major advancements in the emerging fields of diagnostics (sensors) and therapeutics involving thin film metamaterials have been reviewed and underlined; discussing their edge over conventional counterpart techniques; concentrating on their design considerations and feasible ways of achieving them. Challenges faced in sensitivity, precision, accuracy and factors that interfere with the degree of performance of the sensors are also dealt with, herein. Copyright © 2016 Elsevier B.V. All rights reserved.

First results on label-free detection of DNA and protein molecules using a novel integrated sensor technology based on gravimetric detection principles.

PubMed

Gabl, R; Feucht, H-D; Zeininger, H; Eckstein, G; Schreiter, M; Primig, R; Pitzer, D; Wersing, W

2004-01-15

A novel integrated bio-sensor technology based on thin-film bulk acoustic wave resonators on silicon is presented and the feasibility of detecting DNA and protein molecules proofed. The detection principle of these sensors is label-free and relies on a resonance frequency shift caused by mass loading of an acoustic resonator, a principle very well known from quartz crystal micro balances. Integrated ZnO bulk acoustic wave resonators with resonance frequencies around 2 GHz have been fabricated, employing an acoustic mirror for isolation from the silicon substrate. DNA oligos have been thiol-coupled to the gold electrode by on-wafer dispensing. In a further step, samples have either been hybridised or alternatively a protein has been coupled to the receptor. The measurement results show the new bio-sensor being capable of both, detecting proteins as well as the DNA hybridisation without using a label. Due to the substantially higher oscillation frequency, these sensors already show much higher sensitivity and resolution comparable to quartz crystal micro balances. The potential for these sensors and sensors arrays as well as technological challenges will be discussed in detail.

Develop Measures of Effectiveness and Deployment Optimization Rules for Networked Ground Micro-Sensors

DTIC Science & Technology

2001-05-01

types and total #) Ø Control of Sensors ( Scheduling ) Ø Coverage (Time & Area) Uncontrollable Inputs ØWeather Ø Atmospheric Effects Ø Equipment...are widely scattered and used to cue or wakeup other higher-level sensors. Trip line sensors consist of some combination of acoustic, seismic and...Employ a mix if different sensor types in order to increase detection probability 4.4.4.2 Minimize Battery Power • Set schedule turn on and off

Ram-air sample collection device for a chemical warfare agent sensor

DOEpatents

Megerle, Clifford A.; Adkins, Douglas R.; Frye-Mason, Gregory C.

2002-01-01

In a surface acoustic wave sensor mounted within a body, the sensor having a surface acoustic wave array detector and a micro-fabricated sample preconcentrator exposed on a surface of the body, an apparatus for collecting air for the sensor, comprising a housing operatively arranged to mount atop the body, the housing including a multi-stage channel having an inlet and an outlet, the channel having a first stage having a first height and width proximate the inlet, a second stage having a second lower height and width proximate the micro-fabricated sample preconcentrator, a third stage having a still lower third height and width proximate the surface acoustic wave array detector, and a fourth stage having a fourth height and width proximate the outlet, where the fourth height and width are substantially the same as the first height and width.

Self-Powered Wireless Sensors

NASA Technical Reports Server (NTRS)

Dynys, Fred; Sayir, Ali

2008-01-01

NASA's integrated vehicle health management (IVHM) program offers the potential to improve aeronautical safety, reduce cost and improve performance by utilizing networks of wireless sensors. Development of sensor systems for engine hot sections will provide real-time data for prognostics and health management of turbo-engines. Sustainable power to embedded wireless sensors is a key challenge for prolong operation. Harvesting energy from the environment has emerged as a viable technique for power generation. Thermoelectric generators provide a direct conversion of heat energy to electrical energy. Micro-power sources derived from thermoelectric films are desired for applications in harsh thermal environments. Silicon based alloys are being explored for applications in high temperature environments containing oxygen. Chromium based p-type Si/Ge alloys exhibit Seebeck coefficients on the order of 160 micro V/K and low thermal conductance of 2.5 to 5 W/mK. Thermoelectric properties of bulk and thin film silicides will be discussed

Spacecraft hazard avoidance utilizing structured light

NASA Technical Reports Server (NTRS)

Liebe, Carl Christian; Padgett, Curtis; Chapsky, Jacob; Wilson, Daniel; Brown, Kenneth; Jerebets, Sergei; Goldberg, Hannah; Schroeder, Jeffrey

2006-01-01

At JPL, a <5 kg free-flying micro-inspector spacecraft is being designed for host-vehicle inspection. The spacecraft includes a hazard avoidance sensor to navigate relative to the vehicle being inspected. Structured light was selected for hazard avoidance because of its low mass and cost. Structured light is a method of remote sensing 3-dimensional structure of the proximity utilizing a laser, a grating, and a single regular APS camera. The laser beam is split into 400 different beams by a grating to form a regular spaced grid of laser beams that are projected into the field of view of an APS camera. The laser source and the APS camera are separated forming the base of a triangle. The distance to all beam intersections of the host are calculated based on triangulation.

Development of Sensors for Aerospace Applications

NASA Technical Reports Server (NTRS)

Medelius, Pedro

2005-01-01

Advances in technology have led to the availability of smaller and more accurate sensors. Computer power to process large amounts of data is no longer the prevailing issue; thus multiple and redundant sensors can be used to obtain more accurate and comprehensive measurements in a space vehicle. The successful integration and commercialization of micro- and nanotechnology for aerospace applications require that a close and interactive relationship be developed between the technology provider and the end user early in the project. Close coordination between the developers and the end users is critical since qualification for flight is time-consuming and expensive. The successful integration of micro- and nanotechnology into space vehicles requires a coordinated effort throughout the design, development, installation, and integration processes

Modeling and control for micro and nano manipulation

NASA Astrophysics Data System (ADS)

Wejinya, Uchechukwu C.

Manipulation of micro and nano entities implies the movement of micro and nano entities from an initial position (location) to the desire position (location). This operation is not only necessary, but a required task with great precision. The tools needed for the manipulation needs to be chosen properly because the capabilities of the human hand are very restricted. Smart micro and nano manipulation are becoming of great interest in many applications including medicine and industry. In industry, high precision manipulation systems are especially needed for mass production of both micro and nano systems which consist of different component in respective scales. The transition from assembling and manipulating micro and nano entities manually to mass products with high quality is only attainable by automated assembly and manipulation systems. An example is the testing of integrated circuits which can be carried out by exchanging the manipulation tool by an electric probe. Furthermore, in medical research it is customary to pick up a single cell (human, plant, or animal), and carry it to another device which is used to further analyze the cell. Consequently, the cell of interest has to be separated from the other cells and picked up using the appropriate micro/nano tool. Hence it becomes absolutely necessary that the appropriate tool be used for specific micro or nano entity manipulation and assembly. In this research, we focus on developing micro tool for manipulating micro and nano entities in liquid environment using a micro fluidic end effector system with in-situ Polyvinylidene Fluoride (PVDF) sensing. The microfluidic end effector system consists of a DC micro-diaphragm pump and compressor, one region of flexible latex tube, a Polyvinylidene Fluoride (PVDF) sensor for in-situ measurement of micro drag force, and a micro pipette. The micro pipette of the novel microfluidic end effector system has an internal diameter (ID) smaller than 20mum used for microfluidic handling and deposition of micro and nano entities such as carbon nanotubes (CNT), DNA, and for droplet control. The novel microfluidic end effector system with force sensing can significantly improve the success rate for handling/depositing micro/nano entities in the case of carbon nanotubes between micro electrodes. The design, calibration, and experimental implementation of the novel microfluidic end effector is carried out in this research. The experimental results show the success rate for carbon nanotube(s) deposition between micro electrodes can reach close to 80%. Furthermore, carbon nanotubes are of particular interest because they are good candidates for many electronics and sensing applications. The interests in using carbon nanotubes to manufacture electronics and sensors have increased in recent years because of the increase need for making electronics smaller, and their excellent electrical and mechanical properties. These potentials can be achieved if CNTs with semiconducting and metallic band structure can be successfully deposited and separated. The use of dielectrophoresis (DEP) has been established as a course towards the efficient deposition and separation of metallic carbon nanotubes from semiconducting carbon nanotubes. For this reason, this research presents a new mathematical model for dielectrophoresis and electrorotation of carbon nanotubes. Simulation results are presented in this research to validate the developed model. The combination of both the micro robotic manipulation system and the atomic force microscopy (AFM) based nano-robotic system will provide a powerful tool for micro and nano manipulation. Additional applications of this research are endless considering the rapid development of micro and nano technologies.

Fabrication and surface-modification of implantable microprobes for neuroscience studies

NASA Astrophysics Data System (ADS)

Cao, H.; Nguyen, C. M.; Chiao, J. C.

2012-06-01

In this work implantable micro-probes for central nervous system (CNS) studies were developed on silicon and polyimide substrates. The probes which contained micro-electrode arrays with different surface modifications were designed for implantation in the CNS. The electrode surfaces were modified with nano-scale structures that could greatly increase the active surface area in order to enhance the electrochemical current outputs while maintaining micro-scale dimensions of the electrodes and probes. The electrodes were made of gold or platinum, and designed with different sizes. The silicon probes were modified by silicon nanowires fabricated with the vapor-liquid-solid mechanism at high temperatures. With polyimide substrates, the nanostructure modification was carried out by applying concentrated gold or silver colloid solutions onto the micro-electrodes at room temperature. The surfaces of electrodes before and after modification were observed by scanning electron microscopy. The silicon nanowire-modified surface was characterized by cyclic voltammetry. Experiments were carried out to investigate the improvement in sensing performance. The modified electrodes were tested with H2O2, electrochemical L-glutamate and dopamine. Comparisons between electrodes with and without nanostructure modification were conducted showing that the modifications have enhanced the signal outputs of the electrochemical neurotransmitter sensors.