Micro-machined resonator oscillator

DOEpatents

Koehler, Dale R.; Sniegowski, Jeffry J.; Bivens, Hugh M.; Wessendorf, Kurt O.

1994-01-01

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a "telemetered sensor beacon" that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20-100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available.

Fiber optic temperature sensor

NASA Technical Reports Server (NTRS)

Quick, William H. (Inventor); August, Rudolf R. (Inventor); James, Kenneth A. (Inventor); Strahan, Jr., Virgil H. (Inventor); Nichols, Donald K. (Inventor)

1980-01-01

An inexpensive, lightweight fiber optic micro-sensor that is suitable for applications which may require remote temperature sensing. The disclosed temperature sensor includes a phosphor material that, after receiving incident light stimulation, is adapted to emit phosphorescent radiation output signals, the amplitude decay rate and wavelength of which are functions of the sensed temperature.

Use of multi-functional flexible micro-sensors for in situ measurement of temperature, voltage and fuel flow in a proton exchange membrane fuel cell.

PubMed

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased.

Micro-machined resonator oscillator

DOEpatents

Koehler, D.R.; Sniegowski, J.J.; Bivens, H.M.; Wessendorf, K.O.

1994-08-16

A micro-miniature resonator-oscillator is disclosed. Due to the miniaturization of the resonator-oscillator, oscillation frequencies of one MHz and higher are utilized. A thickness-mode quartz resonator housed in a micro-machined silicon package and operated as a telemetered sensor beacon'' that is, a digital, self-powered, remote, parameter measuring-transmitter in the FM-band. The resonator design uses trapped energy principles and temperature dependence methodology through crystal orientation control, with operation in the 20--100 MHz range. High volume batch-processing manufacturing is utilized, with package and resonator assembly at the wafer level. Unique design features include squeeze-film damping for robust vibration and shock performance, capacitive coupling through micro-machined diaphragms allowing resonator excitation at the package exterior, circuit integration and extremely small (0.1 in. square) dimensioning. A family of micro-miniature sensor beacons is also disclosed with widespread applications as bio-medical sensors, vehicle status monitors and high-volume animal identification and health sensors. The sensor family allows measurement of temperatures, chemicals, acceleration and pressure. A microphone and clock realization is also available. 21 figs.

Micro-Optical Distributed Sensors for Aero Propulsion Applications

NASA Astrophysics Data System (ADS)

Arnold, S.; Otugen, V.

2003-01-01

The objective of this research is to develop micro-opto-mechanical system (MOMS)-based sensors for time- and space-resolved measurements of flow properties in aerodynamics applications. The measurement technique we propose uses optical resonances in dielectric micro-spheres that can be excited by radiation tunneling from optical fibers. It exploits the tunneling-induced and morphology-dependent shifts in the resonant frequencies. The shift in the resonant frequency is dependent on the size, shape, and index of refraction of the micro-sphere. A physical change in the environment surrounding a micro-bead can change one or more of these properties of the sphere thereby causing a shift in frequency of resonance. The change of the resonance frequency can be detected with high resolution by scanning a frequency-tunable laser that is coupled into the fiber and observing the transmission spectrum at the output of the fiber. It is expected that, in the future, the measurement concept will lead to a system of distributed micro-sensors providing spatial data resolved in time and space. The present project focuses on the development and demonstration of temperature sensors using the morphology-dependent optical resonances although in the latter part of the work, we will also develop a pressure sensor. During the period covered in this report, the optical and electronic equipment necessary for the experimental work was assembled and the experimental setup was designed for the single sensor temperature measurements. Software was developed for real-time tracking of the optical resonance shifts. Some preliminary experiments were also carried out to detect temperature using a single bead in a water bath.

Micro-optical Distributed Sensors for Aero Propulsion Applications

NASA Technical Reports Server (NTRS)

Arnold, S.; Otugen, V.; Seasholtz, Richard G. (Technical Monitor)

2003-01-01

The objective of this research is to develop micro-opto-mechanical system (MOMS)-based sensors for time- and space-resolved measurements of flow properties in aerodynamics applications. The measurement technique we propose uses optical resonances in dielectric micro-spheres that can be excited by radiation tunneling from optical fibers. It exploits the tunneling-induced and morphology-dependent shifts in the resonant frequencies. The shift in the resonant frequency is dependent on the size, shape, and index of refraction of the micro-sphere. A physical change in the environment surrounding a micro-bead can change one or more of these properties of the sphere thereby causing a shift in frequency of resonance. The change of the resonance frequency can be detected with high resolution by scanning a frequency-tunable laser that is coupled into the fiber and observing the transmission spectrum at the output of the fiber. It is expected that, in the future, the measurement concept will lead to a system of distributed micro-sensors providing spatial data resolved in time and space. The present project focuses on the development and demonstration of temperature sensors using the morphology-dependent optical resonances although in the latter part of the work, we will also develop a pressure sensor. During the period covered in this report, the optical and electronic equipment necessary for the experimental work was assembled and the experimental setup was designed for the single sensor temperature measurements. Software was developed for real-time tracking of the optical resonance shifts. Some preliminary experiments were also carried out to detect temperature using a single bead in a water bath.

Use of Multi-Functional Flexible Micro-Sensors for in situ Measurement of Temperature, Voltage and Fuel Flow in a Proton Exchange Membrane Fuel Cell

PubMed Central

Lee, Chi-Yuan; Chan, Pin-Cheng; Lee, Chung-Ju

2010-01-01

Temperature, voltage and fuel flow distribution all contribute considerably to fuel cell performance. Conventional methods cannot accurately determine parameter changes inside a fuel cell. This investigation developed flexible and multi-functional micro sensors on a 40 μm-thick stainless steel foil substrate by using micro-electro-mechanical systems (MEMS) and embedded them in a proton exchange membrane fuel cell (PEMFC) to measure the temperature, voltage and flow. Users can monitor and control in situ the temperature, voltage and fuel flow distribution in the cell. Thereby, both fuel cell performance and lifetime can be increased. PMID:22163545

U-shaped micro-groove fiber based on femtosecond laser processing for humidity sensing

NASA Astrophysics Data System (ADS)

Fu, Gui; Ma, Li-li; Su, Fu-fang; Shi, Meng

2018-05-01

A novel optical fiber sensor with a U-shaped micro-groove structure ablated by femtosecond laser on single-mode fiber for measuring air relative humidity (RH) is reported in this paper. In order to improve the accuracy of sensor, a graphene oxide (GO)/polyvinyl alcohol (PVA) composite film is coated on the surface of micro-groove structure. In the U-shaped micro-groove structure, the remaining core and micro-cavity in the micro-groove make up two major optical propagation paths, forming a Mach-Zehnder interferometer (MZI). The sensor has a good linear response within the RH range of 30%—85%, and the maximum sensitivity can reach 0.638 1 nm/%RH. The effect of temperature on the overall performance of the humidity sensor is also investigated. As a new type of all-fiber device, the sensor shows excellent sensitivity and stability.

A novel polyimide based micro heater with high temperature uniformity

DOE PAGES

Yu, Shifeng; Wang, Shuyu; Lu, Ming; ...

2017-02-06

MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as amore » simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.« less

A novel polyimide based micro heater with high temperature uniformity

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yu, Shifeng; Wang, Shuyu; Lu, Ming

MEMS based micro heaters are a key component in micro bio-calorimetry, nondispersive infrared gas sensors, semiconductor gas sensors and microfluidic actuators. A micro heater with a uniform temperature distribution in the heating area and short response time is desirable in ultrasensitive temperature-dependent measurements. In this study, we propose a novel micro heater design to reach a uniform temperature in a large heating area by optimizing the heating power density distribution in the heating area. A polyimide membrane is utilized as the substrate to reduce the thermal mass and heat loss which allows for fast thermal response as well as amore » simplified fabrication process. A gold and titanium heating element is fabricated on the flexible polyimide substrate using the standard MEMS technique. The temperature distribution in the heating area for a certain power input is measured by an IR camera, and is consistent with FEA simulation results. Finally, this design can achieve fast response and uniform temperature distribution, which is quite suitable for the programmable heating such as impulse and step driving.« less

Chemical Gas Sensors for Aeronautic and Space Applications 2

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Chen, L. Y.; Neudeck, P. G.; Knight, D.; Liu, C. C.; Wu, Q. H.; Zhou, H. J.; Makel, D.; Liu, M.; Rauch, W. A.

1998-01-01

Aeronautic and Space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of most interest include launch vehicle safety monitoring emission monitoring and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensor is based on progress two types of technology: 1) Micro-machining and micro-fabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this micro-fabricated gas sensor technology make this area of sensor development a field of significant interest.

Development of GaN-based micro chemical sensor nodes

NASA Technical Reports Server (NTRS)

Son, Kyung-ah; Prokopuk, Nicholas; George, Thomas; Moon, Jeong S.

2005-01-01

Sensors based on III-N technology are gaining significant interest due to their potential for monolithic integration of RF transceivers and light sources and the capability of high temperature operations. We are developing a GaN-based micro chemical sensor node for remote detection of chemical toxins, and present electrical responses of AlGaN/GaN HEMT (High Electron Mobility Transistor) sensors to chemical toxins as well as other common gases.

Thermally Stable, Piezoelectric and Pyroelectric Polymeric Substrates and Method Relating Thereto

NASA Technical Reports Server (NTRS)

Simpson, Joycelyn O. (Inventor); St.Claire, Terry L. (Inventor)

2002-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared, This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers, acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors. in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches. adjustable fresnel lenses, speakers, tactile sensors, weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 100 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrates; heating the metal electrode coated polymeric substrate in a low dielectric medium; applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Thermally Stable, Piezoelectric and Pyroelectric Polymeric Substrates

NASA Technical Reports Server (NTRS)

Simpson, Joycely O. (Inventor); St.Clair, Terry L. (Inventor)

1999-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared. This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers. acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors, in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches, adjustable fresnel lenses, speakers, tactile sensors. weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 1000 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrate; heating the metal electrode coated polymeric substrate in a low dielectric medium; applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Method of Making Thermally Stable, Piezoelectric and Proelectric Polymeric Substrates

NASA Technical Reports Server (NTRS)

Simpson, Joycelyn O. (Inventor); St.Clair, Terry L. (Inventor)

1999-01-01

A thermally stable, piezoelectric and pyroelectric polymeric substrate was prepared. This thermally stable, piezoelectric and pyroelectric polymeric substrate may be used to prepare electromechanical transducers, thermomechanical transducers, accelerometers, acoustic sensors, infrared sensors, pressure sensors, vibration sensors, impact sensors. in-situ temperature sensors, in-situ stress/strain sensors, micro actuators, switches, adjustable fresnel lenses, speakers, tactile sensors, weather sensors, micro positioners, ultrasonic devices, power generators, tunable reflectors, microphones, and hydrophones. The process for preparing these polymeric substrates includes: providing a polymeric substrate having a softening temperature greater than 100 C; depositing a metal electrode material onto the polymer film; attaching a plurality of electrical leads to the metal electrode coated polymeric substrate; heating the metal electrode coated polymeric substrate in a low dielectric medium: applying a voltage to the heated metal electrode coated polymeric substrate to induce polarization; and cooling the polarized metal electrode coated polymeric electrode while maintaining a constant voltage.

Optical temperature sensing of NaYbF4: Tm3+@SiO2 core-shell micro-particles induced by infrared excitation.

PubMed

Wang, Xiangfu; Zheng, Jin; Xuan, Yan; Yan, Xiaohong

2013-09-09

NaYbF(4):Tm3+@SiO(2) core-shell micro-particles were synthesized by a hydrothermal method and subsequent ultrasonic coating process. Optical temperature sensing has been observed in NaYbF4: Tm(3+)@SiO(2)core-shell micro-particles with a 980 nm infrared laser as excitation source.The fluorescence intensity ratios, optical temperature sensitivity, and temperature dependent population re-distribution ability from the thermally coupled (1)D(2)/(1)G(4) and (3)F(2) /(3)H(4) levels of the Tm(3+) ion have been analyzed as a function of temperature in the range of 100~700 K in order to check its availability as a optical temperature sensor. A better behavior as a lowtemperature sensor has been obtained with a minimum sensitivity of 5.4 × 10(-4) K(-1) at 430 K. It exhibits temperature induced population re-distribution from (1)D(2) /(1)G(4) thermally coupled levels at higher temperature range.

Validation of a new micro-manometer pressure sensor for cardiovascular measurements in mice.

PubMed

Trevino, Rodolfo J; Jones, Douglas L; Escobedo, Daniel; Porterfield, John; Larson, Erik; Chisholm, Gary B; Barton, Amanda; Feldman, Marc D

2010-01-01

Abstract The Scisense (London, ON, Canada) micro-manometer pressure sensor is currently being used by investigators to evaluate cardiovascular physiology in mice, but has not been validated to date. The purpose of the current study is to compare the 1.2 F Scisense pressure sensor to the current gold standard produced by Millar Instruments (Houston, TX) (1.4 F). In vitro comparisons were preformed including temperature drift, frequency response analysis up to 250 Hz, and damping coefficient and natural frequency determined via a pop test. The authors also performed in vivo comparisons including pressure drift, dose-response studies to IV isoproterenol, maximum adrenergic stimulation with IV dobutamine, and simultaneous placement of both micro-manometer pressure sensors in the same intact murine hearts. The authors conclude that both sensors are equivalent, and that the Scisense pressure sensor represents an alternative to the current gold standard, the Millar micro-manometer pressure sensor for in vivo pressure measurements in the mouse.

Design of liquid temperature sensor based on bending loss phenomenon of plastic optic fiber and electro-optic effect of Mach-Zehnder interferometer

NASA Astrophysics Data System (ADS)

Kumar, Santosh; Swaminathan, S.

2016-04-01

The efficient application of electro-optic effect in lithium niobate based Mach-Zehnder interferometer (MZI) to construct the temperature sensor is used. An experimental set up for liquid temperature sensor is proposed. Temperature dependence of the bending loss light energy in multimode micro-plastic optical fiber (m-POF) and electro-optic effect of MZI are used. The performance of sensor at different temperatures is measured. It is seen that the light output of MZI switches from one port to the other port as temperature of liquid changes from 0°C to 100°C.

Developing Multilayer Thin Film Strain Sensors With High Thermal Stability

NASA Technical Reports Server (NTRS)

Wrbanek, John D.; Fralick, Gustave C.; Gonzalez, Jose M., III

2006-01-01

A multilayer thin film strain sensor for large temperature range use is under development using a reactively-sputtered process. The sensor is capable of being fabricated in fine line widths utilizing the sacrificial-layer lift-off process that is used for micro-fabricated noble-metal sensors. Tantalum nitride films were optimized using reactive sputtering with an unbalanced magnetron source. A first approximation model of multilayer resistance and temperature coefficient of resistance was used to set the film thicknesses in the multilayer film sensor. Two multifunctional sensors were fabricated using multilayered films of tantalum nitride and palladium chromium, and tested for low temperature resistivity, TCR and strain response. The low temperature coefficient of resistance of the films will result in improved stability in thin film sensors for low to high temperature use.

[Development of Micro-Spectrometer with a Function of Timely Temperature Compensation].

PubMed

Bao, Jian-guang; Liu, Zheng-kun; Chen, Huo-yao; Lin, Ji-ping; Fu, Shao-jun

2015-05-01

Temperature drift will be brought to Micro-Spectrometer used for demodulating the Varied Line-Space(VLS) grating position sensor on aircraft due to high-low temperature shock. We successfully made a Micro-Spectrometer, for the VLS grating position sensor on aircraft, which still have stable output under temperature shock enviro nment. In order to present a real time temperature compensation scheme, the effects temperature change has on Micro-Spectrometer are analyzed and the traditional cross Czerny-Turner (C-T)optical structure is optimized. Both optical structures are analyzed by optics design software ZEMAX and proved that comparedwithtraditional cross C-T optical structure, the newone can accomplish not only smaller spectrum drift but also spectrum drift with better linearity. Based on the new optical structure. The scheme of using reference wavelength to accomplish real time temperature compensation was proposed and a Micro-fiber Spectrometer was successfully manufactured, whith is with Volume of 80 mm X 70 mmX 70 mm, integration time of 8 ~1 000 ms and FullWidthHalfMaximum(FWHM) of 2 nm. Experiments show that the new spectrometer meets the design requirement. Under high temperature in the range of nearly 60 °C, the standard error of wavelength of this new spectrometer is smaller than 0. 1 nm, and the maximum error of wavelength is 0. 14 nm, which is much smaller than required 0. 3 nm. Innovations of this paper are the schemeof real time temperature compensation, the new cross C-T optical structure and a Micro-fiber Spectrometer based on it.

Wireless remote weather monitoring system based on MEMS technologies.

PubMed

Ma, Rong-Hua; Wang, Yu-Hsiang; Lee, Chia-Yen

2011-01-01

This study proposes a wireless remote weather monitoring system based on Micro-Electro-Mechanical Systems (MEMS) and wireless sensor network (WSN) technologies comprising sensors for the measurement of temperature, humidity, pressure, wind speed and direction, integrated on a single chip. The sensing signals are transmitted between the Octopus II-A sensor nodes using WSN technology, following amplification and analog/digital conversion (ADC). Experimental results show that the resistance of the micro temperature sensor increases linearly with input temperature, with an average TCR (temperature coefficient of resistance) value of 8.2 × 10(-4) (°C(-1)). The resistance of the pressure sensor also increases linearly with air pressure, with an average sensitivity value of 3.5 × 10(-2) (Ω/kPa). The sensitivity to humidity increases with ambient temperature due to the effect of temperature on the dielectric constant, which was determined to be 16.9, 21.4, 27.0, and 38.2 (pF/%RH) at 27 °C, 30 °C, 40 °C, and 50 °C, respectively. The velocity of airflow is obtained by summing the variations in resistor response as airflow passed over the sensors providing sensitivity of 4.2 × 10(-2), 9.2 × 10(-2), 9.7 × 10(-2) (Ω/ms(-1)) with power consumption by the heating resistor of 0.2, 0.3, and 0.5 W, respectively. The passage of air across the surface of the flow sensors prompts variations in temperature among each of the sensing resistors. Evaluating these variations in resistance caused by the temperature change enables the measurement of wind direction.

Dynamics, Control, and Fabrication of Micro Embedded Heaters and Sensors for Micro SMA Active Endoscopes

NASA Astrophysics Data System (ADS)

Aphanuphong, Sutha

This research investigates design and control of an active catheter for minimally invasive medical procedures. Microfabrication techniques are developed and several prototypes were constructed. The understanding and analysis results from each design iteration are utilized to improve the overall design and the performance of each revision. An innovative co-fabrication method is explored to simplify the fabrication process and also improve the quality, repeatability, and reliability of the active catheter. This co-fabrication method enables a unique compact integrated heater and sensor film to be directly constructed on a shape memory alloy (SMA) sheet and to be utilized as an outline mask to pattern a micro SMA actuator. There are two functions integrated in the sensor film: heat sources to actuate the micro SMA actuator and sensors to provide temperature and strain of the active catheter to closed-loop control algorithms. Three main aspects are explored in this dissertation: thermal dynamics in the MicroFlex (muF) film and its effect on the sensor capabilities; non-minimum phase behavior and its effect on control performance, and film micro fabrication design and its effect on thermal dynamics. The sensor film developed from this understanding is able to deliver excellent heating and sensing performance with a simple design.

High-temperature fiber-optic Fabry-Perot interferometric sensors.

PubMed

Ding, Wenhui; Jiang, Yi; Gao, Ran; Liu, Yuewu

2015-05-01

A photonic crystal fiber (PCF) based high-temperature fiber-optic sensor is proposed and experimentally demonstrated. The sensor head is a Fabry-Perot cavity manufactured with a short section of endless single-mode photonic crystal fiber (ESM PCF). The interferometric spectrum of the Fabry-Perot interferometer is collected by a charge coupled device linear array based micro spectrometer. A high-resolution demodulation algorithm is used to interrogate the peak wavelengths. Experimental results show that the temperature range of 1200 °C and the temperature resolution of 1 °C are achieved.

High-temperature fiber-optic Fabry-Perot interferometric sensors

NASA Astrophysics Data System (ADS)

Ding, Wenhui; Jiang, Yi; Gao, Ran; Liu, Yuewu

2015-05-01

A photonic crystal fiber (PCF) based high-temperature fiber-optic sensor is proposed and experimentally demonstrated. The sensor head is a Fabry-Perot cavity manufactured with a short section of endless single-mode photonic crystal fiber (ESM PCF). The interferometric spectrum of the Fabry-Perot interferometer is collected by a charge coupled device linear array based micro spectrometer. A high-resolution demodulation algorithm is used to interrogate the peak wavelengths. Experimental results show that the temperature range of 1200 °C and the temperature resolution of 1 °C are achieved.

A quartz-based micro catalytic methane sensor by high resolution screen printing

NASA Astrophysics Data System (ADS)

Lu, Wenshuai; Jing, Gaoshan; Bian, Xiaomeng; Yu, Hongyan; Cui, Tianhong

2016-02-01

A micro catalytic methane sensor was proposed and fabricated on a bulk fused quartz substrate using a high resolution screen printing technique for the first time, with reduced power consumption and optimized sensitivity. The sensor was designed by the finite element method and quartz was chosen as the substrate material and alumina support with optimized dimensions. Fabrication of the sensor consisted of two MEMS processes, lift-off and high resolution screen printing, with the advantages of high yield and uniformity. When the sensor’s regional working temperature changes from 250 °C to 470 °C, its sensitivity increases, as well as the power consumption. The highest sensitivity can reach 1.52 mV/% CH4. A temperature of 300 °C was chosen as the optimized working temperature, and the sensor’s sensitivity, power consumption, nonlinearity and response time are 0.77 mV/% CH4, 415 mW, 2.6%, and 35 s, respectively. This simple, but highly uniform fabrication process and the reliable performance of this sensor may lead to wide applications for methane detection.

Cascaded-cavity Fabry-Perot interferometer for simultaneous measurement of temperature and strain with cross-sensitivity compensation

NASA Astrophysics Data System (ADS)

Tian, Jiajun; Jiao, Yuzhu; Ji, Shaobo; Dong, Xiaolong; Yao, Yong

2018-04-01

We propose and demonstrate a fiber sensor for simultaneous temperature and strain measurements. The proposed sensor is implemented by a cascaded-cavity Fabry-Perot (FP) fiber interferometer. The two cascaded FP cavities comprise a micro-air-cavity in a hollow-core tube fiber and a micro-silica-cavity in a standard single-mode fiber. To separate the interference spectrum of each FP cavity, the total spectrum is filtered in the frequency domain through band-pass filters, whose central frequencies were predesigned based on the relationship between the spatial frequency and free spectral range of each FP cavity. The different cross-sectional areas and thermal-optic coefficients of the two FP cavities confer different sensitivities to temperature and strain. Both parameters were measured simultaneously by tracking the wavelength shifts in the filtered interference spectra of the FP cavities. Moreover, the temperature-strain cross-sensitivity was compensated by solving a sensitivity-coefficient matrix equation for the two cavities, using the calibrated temperatures and strains. Other advantages of the proposed sensor are simple fabrication and an all-fiber structure. Owing to these properties, the proposed sensor is potentially applicable to real sensing applications.

Packaging Technologies for 500C SiC Electronics and Sensors

NASA Technical Reports Server (NTRS)

Chen, Liang-Yu

2013-01-01

Various SiC electronics and sensors are currently under development for applications in 500C high temperature environments such as hot sections of aerospace engines and the surface of Venus. In order to conduct long-term test and eventually commercialize these SiC devices, compatible packaging technologies for the SiC electronics and sensors are required. This presentation reviews packaging technologies developed for 500C SiC electronics and sensors to address both component and subsystem level packaging needs for high temperature environments. The packaging system for high temperature SiC electronics includes ceramic chip-level packages, ceramic printed circuit boards (PCBs), and edge-connectors. High temperature durable die-attach and precious metal wire-bonding are used in the chip-level packaging process. A high temperature sensor package is specifically designed to address high temperature micro-fabricated capacitive pressure sensors for high differential pressure environments. This presentation describes development of these electronics and sensor packaging technologies, including some testing results of SiC electronics and capacitive pressure sensors using these packaging technologies.

A local sensor for joint temperature and velocity measurements in turbulent flows

NASA Astrophysics Data System (ADS)

Salort, Julien; Rusaouën, Éléonore; Robert, Laurent; du Puits, Ronald; Loesch, Alice; Pirotte, Olivier; Roche, Philippe-E.; Castaing, Bernard; Chillà, Francesca

2018-01-01

We present the principle for a micro-sensor aimed at measuring local correlations of turbulent velocity and temperature. The operating principle is versatile and can be adapted for various types of flow. It is based on a micro-machined cantilever, on the tip of which a platinum resistor is patterned. The deflection of the cantilever yields an estimate for the local velocity, and the impedance of the platinum yields an estimate for the local temperature. The velocity measurement is tested in two turbulent jets: one with air at room temperature which allows us to compare with well-known calibrated reference anemometers, and another one in the GReC jet at CERN with cryogenic gaseous helium which allows a much larger range of resolved turbulent scales. The recording of temperature fluctuations is tested in the Barrel of Ilmenau which provides a controlled turbulent thermal flow in air. Measurements in the wake of a heated or cooled cylinder demonstrate the capability of the sensor to display the cross correlation between temperature and velocity correctly.

Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

NASA Astrophysics Data System (ADS)

Li, Chuang; Cordovilla, Francisco; Ocaña, José L.

2018-01-01

This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure. The proposed structure can alleviate the contradiction between sensitivity and linearity to realize the micro measurement with high accuracy. In this study, the design, fabrication and test of the sensor are involved. By utilizing the finite element analysis (FEA) to analyze the stress distribution of sensitive elements and subsequently deducing the relationships between structural dimensions and mechanical performance, the optimization process makes the sensor achieve a higher sensitivity and a lower pressure nonlinearity. Based on the deduced equations, a series of optimized FBBM structure dimensions are ultimately determined. The designed sensor is fabricated on a silicon wafer by using traditional MEMS bulk-micromachining and anodic bonding technology. Experimental results show that the sensor achieves the sensitivity of 4.65 mV/V/kPa and pressure nonlinearity of 0.25% FSS in the operating range of 0-5 kPa at room temperature, indicating that this novel structure sensor can be applied in measuring the absolute micro pressure lower than 5 kPa.

Electrochemical determination of nitrate with nitrate reductase-immobilized electrodes under ambient air.

PubMed

Quan, De; Shim, Jun Ho; Kim, Jong Dae; Park, Hyung Soo; Cha, Geun Sig; Nam, Hakhyun

2005-07-15

Nitrate monitoring biosensors were prepared by immobilizing nitrate reductase derived from yeast on a glassy carbon electrode (GCE, d = 3 mm) or screen-printed carbon paste electrode (SPCE, d = 3 mm) using a polymer (poly(vinyl alcohol)) entrapment method. The sensor could directly determine the nitrate in an unpurged aqueous solution with the aid of an appropriate oxygen scavenger: the nitrate reduction reaction driven by the enzyme and an electron-transfer mediator, methyl viologen, at -0.85 V (GCE vs Ag/AgCl) or at -0.90 V (SPCE vs Ag/AgCl) exhibited no oxygen interference in a sulfite-added solution. The electroanalytical properties of optimized biosensors were measured: the sensitivity, linear response range, and detection limit of the sensors based on GCE were 7.3 nA/microM, 15-300 microM (r2 = 0.995), and 4.1 microM (S/N = 3), respectively, and those of SPCE were 5.5 nA/microM, 15-250 microM (r2 = 0.996), and 5.5 microM (S/N = 3), respectively. The disposable SPCE-based biosensor with a built-in well- or capillary-type sample cell provided high sensor-to-sensor reproducibility (RSD < 3.4% below 250 microM) and could be used more than one month in normal room-temperature storage condition. The utility of the proposed sensor system was demonstrated by determining nitrate in real samples.

Fabrication of a sensing module using micromachined biosensors.

PubMed

Suzuki, H; Arakawa, H; Karube, I

2001-12-01

Micromachining is a powerful tool in constructing micro biosensors and micro systems which incorporate them. A sensing module for blood components was fabricated using the technology. The analytes include glucose, urea, uric acid, creatine, and creatinine. Transducers used to construct the corresponding sensors were a Severinghaus-type carbon dioxide electrode for the urea sensor and a Clark-type oxygen electrode for the other analytes. In these electrodes, detecting electrode patterns were formed on a glass substrate by photolithography and the micro container for the internal electrolyte solution was formed on a silicon substrate by anisotropic etching. A through-hole was formed in the sensitive area, where a silicone gas-permeable membrane was formed and an enzyme was immobilized. The sensors were characterized in terms of pH and temperature dependence and calibration curves along with detection limits. Furthermore, the sensors were incorporated in an acrylate flow cell. Simultaneous operation of these sensors was successfully conducted and distinct and stable responses were observed for respective sensors.

Comprehensive and critical literature review on insitu micro-sensors for application in tribology

NASA Astrophysics Data System (ADS)

Ling, Frederick F.; Wang, Ning; Murray, S. F.

1994-04-01

Two filters have been invoked in this survey of literature on sensors: (1) only those which might have relevance, direct or potential, to machinery condition sensing are included; (2) only those which might lend themselves to, presently or potentially, fiber-optical mode of information transmission are included. 190 records were selected to review from the 28,000 found using the University of Texas at Austin's U-Search and the Engineering Index, augmented by several commercial data bases, under LITERATURE ON SENSORS. Throughout, a sensor or transducer is understood to be a device that provides a usable output in response to a specific measurand; it is understood that such devices are called different names in different fields. This project has a highly restricted scope. The goal of the project concerns chemical as well as physical sensors of micro-dimension pertaining to lubricated contacts as to abrasive wear, friction, corrosive wear, cracks, micro-partile analysis, identification of surface film formation, load, miro-particle detection, position, speed, surface damage, and temperature. A research need analysis was proposed in anticipation of the aforementioned fact that few sensors in this context would be in-situ, let alone being of micro-dimension.

Miniature fiber Fabry-Perot sensors based on fusion splicing

NASA Astrophysics Data System (ADS)

Zhu, Jia-li; Wang, Ming; Yang, Chun-di; Wang, Ting-ting

2013-03-01

Fiber-optic Fabry-Perot (F-P) sensors are widely investigated because they have several advantages over conventional sensors, such as immunity to electromagnetic interference, ability to operate under bad environments, high sensitivity and the potential for multiplexing. A new method to fabricate micro-cavity Fabry-Perot interferometer is introduced, which is fusion splicing a section of conventional single-mode fiber (SMF) and a section of hollow core or solid core photonic crystal fiber (PCF) together to form a micro-cavity at the splice joint. The technology of fusion splicing is discussed, and two miniature optical fiber sensors based on Fabry-Perot interference using fusion splicing are presented. The two sensors are completely made of fused silica, and have good high-temperature capability.

One-step synthesis of multi-emission carbon nanodots for ratiometric temperature sensing

NASA Astrophysics Data System (ADS)

Nguyen, Vanthan; Yan, Lihe; Xu, Huanhuan; Yue, Mengmeng

2018-01-01

Measuring temperature with greater precision at localized small length scales or in a nonperturbative manner is a necessity in widespread applications, such as integrated photonic devices, micro/nano electronics, biology, and medical diagnostics. To this context, use of nanoscale fluorescent temperature probes is regarded as the most promising method for temperature sensing because they are noninvasive, accurate, and enable remote micro/nanoscale imaging. Here, we propose a novel ratiometric fluorescent sensor for nanothermometry using carbon nanodots (C-dots). The C-dots were synthesized by one-step method using femtosecond laser ablation and exhibit unique multi-emission property due to emissions from abundant functional groups on its surface. The as-prepared C-dots demonstrate excellent ratiometric temperature sensing under single wavelength excitation that achieves high temperature sensitivity with a 1.48% change per °C ratiometric response over wide-ranging temperature (5-85 °C) in aqueous buffer. The ratiometric sensor shows excellent reversibility and stability, holding great promise for the accurate measurement of temperature in many practical applications.

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.

PubMed

Pang, Cheng; Bae, Hyungdae; Gupta, Ashwani; Bryden, Kenneth; Yu, Miao

2013-09-23

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

Integrated multi-channel nano-engineered optical hydrogen and temperature sensor detection systems for launch vehicles

NASA Astrophysics Data System (ADS)

Alam, M. Z.; Moreno, J.; Aitchison, J. S.; Mojahedi, M.; Kazemi, A. A.

2008-08-01

Launch vehicles and other satellite users need launch services that are highly reliable, less complex, easier to test, and cost effective. Being a very small molecule, hydrogen is prone to leakage through seals and micro-cracks. Hydrogen detection in space application is very challenging; public acceptance of hydrogen fuel would require the integration of a reliable hydrogen safety sensor. For detecting leakage of cryogenic fluids in spaceport facilities, launch vehicle industry and aerospace agencies are currently relying heavily on the bulky mass spectrometers, which fill one or more equipment racks, and weigh several hundred kilograms. Therefore, there is a critical need for miniaturized sensors and instruments suitable for use in space applications. This paper describes a novel multi-channel integrated nano-engineered optical sensor to detect hydrogen and monitor the temperature. The integrated optic sensor is made of multi-channel waveguide elements that measure hydrogen concentration in real Time. Our sensor is based on the use of a high index waveguide with a Ni/Pd overlay to detect hydrogen. When hydrogen is absorbed into the Ni/Pd alloy there is a change in the absorption of the material and the optical signal in the waveguide is increased. Our design uses a thin alloy (few nanometers thick) overlay which facilitates the absorption of the hydrogen and will result in a response time of approximately few seconds. Like other Pd/Pd-Ni based sensors the device response varies with temperature and hence the effects of temperature variations must be taken into account. One solution to this problem is simultaneous measurement of temperature in addition to hydrogen concentration at the same vicinity. Our approach here is to propose a temperature sensor that can easily be integrated on the same platform as the hydrogen sensor reported earlier by our group. One suitable choice of material system is silicon on insulator (SOI). Here, we propose a micro ring resonators (MRR) based temperature sensor designed on SOI that measures temperature by monitoring the output optical power.

Real Time Monitoring of Temperature of a Micro Proton Exchange Membrane Fuel Cell

PubMed Central

Lee, Chi-Yuan; Lee, Shuo-Jen; Hu, Yuh-Chung; Shih, Wen-Pin; Fan, Wei-Yuan; Chuang, Chih-Wei

2009-01-01

Silicon micro-hole arrays (Si-MHA) were fabricated as a gas diffusion layer (GDL) in a micro fuel cell using the micro-electro-mechanical-systems (MEMS) fabrication technique. The resistance temperature detector (RTD) sensor was integrated with the GDL on a bipolar plate to measure the temperature inside the fuel cell. Experimental results demonstrate that temperature was generally linearly related to resistance and that accuracy and sensitivity were within 0.5 °C and 1.68×10−3/°C, respectively. The best experimental performance was 9.37 mW/cm2 at an H2/O2 dry gas flow rate of 30/30 SCCM. Fuel cell temperature during operation was 27 °C, as measured using thermocouples in contact with the backside of the electrode. Fuel cell operating temperature measured in situ was 30.5 °C. PMID:22573963

AOI [3] High-Temperature Nano-Derived Micro-H 2 and - H 2S Sensors

DOE Office of Scientific and Technical Information (OSTI.GOV)

Sabolsky, Edward M.

2014-08-01

The emissions from coal-fired power plants remain a significant concern for air quality. This environmental challenge must be overcome by controlling the emission of sulfur dioxide (SO 2) and hydrogen sulfide (H 2S) throughout the entire coal combustion process. One of the processes which could specifically benefit from robust, low cost, and high temperature compatible gas sensors is the coal gasification process which converts coal and/or biomass into syngas. Hydrogen (H 2), carbon monoxide (CO) and sulfur compounds make up 33%, 43% and 2% of syngas, respectively. Therefore, development of a high temperature (>500°C) chemical sensor for in-situ monitoring ofmore » H 2, H 2S and SO2 2 levels during coal gasification is strongly desired. The selective detection of SO 2/H 2S in the presence of H 2, is a formidable task for a sensor designer. In order to ensure effective operation of these chemical sensors, the sensor system must inexpensively function within harsh temperature and chemical environment. Currently available sensing approaches, which are based on gas chromatography, electrochemistry, and IR-spectroscopy, do not satisfy the required cost and performance targets. This work focused on the development microsensors that can be applied to this application. In order to develop the high- temperature compatible microsensor, this work addressed various issues related to sensor stability, selectivity, and miniaturization. In the research project entitled “High-Temperature Nano-Derived Micro-H 2 and -H 2S Sensors”, the team worked to develop micro-scale, chemical sensors and sensor arrays composed of nano-derived, metal-oxide composite materials to detect gases like H 2, SO 2, and H 2S within high-temperature environments (>500°C). The research was completed in collaboration with NexTech Materials, Ltd. (Lewis Center, Ohio). NexTech assisted in the testing of the sensors in syngas with contaminate levels of H 2S. The idea of including nanomaterials as the sensing material within resistive-type chemical sensor platforms was to increase the sensitivity (as shown for room temperature applications). Unfortunately, nanomaterials are not stable at high temperatures due to sintering and coarsening processes that are driven by their high surface to volume ratio. Therefore, new hydrogen and sulfur selective nanomaterial systems with high selectivity and stability properties in the proposed harsh environment were investigated. Different nano-morphologies of zirconate, molybdate, and tungstate compounds were investigated. The fabrication of the microsensors consisted of the deposition of the selective nanomaterial systems over metal based interconnects on an inert substrate. This work utilized the chemi-resistive (resistive- type) microsensor architecture where the chemically and structurally stable, high temperature compatible electrodes were sputtered onto a ceramic substrate. The nanomaterial sensing systems were deposited over the electrodes using a lost mold method patterned by conventional optical lithography. The microsensor configuration with optimized nanomaterial system was tested and compared to a millimeter-size sensor e outcomes of this research will contribute to the economical application of sensor arrays for simultaneous sensing of H 2, H 2S, and SO 2.« less

In-situ Monitoring of Internal Local Temperature and Voltage of Proton Exchange Membrane Fuel Cells

PubMed Central

Lee, Chi-Yuan; Fan, Wei-Yuan; Hsieh, Wei-Jung

2010-01-01

The distribution of temperature and voltage of a fuel cell are key factors that influence performance. Conventional sensors are normally large, and are also useful only for making external measurements of fuel cells. Centimeter-scale sensors for making invasive measurements are frequently unable to accurately measure the interior changes of a fuel cell. This work focuses mainly on fabricating flexible multi-functional microsensors (for temperature and voltage) to measure variations in the local temperature and voltage of proton exchange membrane fuel cells (PEMFC) that are based on micro-electro-mechanical systems (MEMS). The power density at 0.5 V without a sensor is 450 mW/cm2, and that with a sensor is 426 mW/cm2. Since the reaction area of a fuel cell with a sensor is approximately 12% smaller than that without a sensor, but the performance of the former is only 5% worse. PMID:22163556

In-situ monitoring of internal local temperature and voltage of proton exchange membrane fuel cells.

PubMed

Lee, Chi-Yuan; Fan, Wei-Yuan; Hsieh, Wei-Jung

2010-01-01

The distribution of temperature and voltage of a fuel cell are key factors that influence performance. Conventional sensors are normally large, and are also useful only for making external measurements of fuel cells. Centimeter-scale sensors for making invasive measurements are frequently unable to accurately measure the interior changes of a fuel cell. This work focuses mainly on fabricating flexible multi-functional microsensors (for temperature and voltage) to measure variations in the local temperature and voltage of proton exchange membrane fuel cells (PEMFC) that are based on micro-electro-mechanical systems (MEMS). The power density at 0.5 V without a sensor is 450 mW/cm(2), and that with a sensor is 426 mW/cm(2). Since the reaction area of a fuel cell with a sensor is approximately 12% smaller than that without a sensor, but the performance of the former is only 5% worse.

Micro-sensors for in-situ meteorological measurements

NASA Technical Reports Server (NTRS)

Crisp, David; Kaiser, William J.; Vanzandt, Thomas R.; Tillman, James E.

1993-01-01

Improved in-situ meteorological measurements are needed for monitoring the weather and climate of the terrestrial and Martian atmospheres. We have initiated a program to assess the feasibility and utility of micro-sensors for precise in-situ meteorological measurements in these environments. Sensors are being developed for measuring pressure, temperature, wind velocity, humidity, and aerosol amounts. Silicon micro-machining and large scale integration technologies are being used to make sensors that are small, rugged, lightweight, and require very little power. Our long-term goal is to develop very accurate miniaturized sensors that can be incorporated into complete instrument packages or 'micro weather stations,' and deployed on a variety of platforms. If conventional commercially available silicon production techniques can be used to fabricate these sensor packages, it will eventually be possible to mass-produce them at low cost. For studies of the Earth's troposphere and stratosphere, they could be deployed on aircraft, dropsondes, radiosondes, or autonomous surface stations at remote sites. Improved sensor accuracy and reduced sensor cost are the primary challenges for these applications. For studies of the Martian atmosphere, these sensor packages could be incorporated into the small entry probes and surface landers that are being planned for the Mars Environmental SURvey (MESUR) Mission. That decade-long program will deploy a global network of small stations on the Martian surface for monitoring meteorological and geological processes. Low mass, low power, durability, large dynamic range and calibration stability are the principal challenges for this application. Our progress on each of these sensor types is presented.

Fiber Bragg Grating Array as a Quasi Distributed Temperature Sensor for Furnace Boiler Applications

NASA Astrophysics Data System (ADS)

Reddy, P. Saidi; Prasad, R. L. N. Sai; Sengupta, D.; Shankar, M. Sai; Srimannarayana, K.; Kishore, P.; Rao, P. Vengal

2011-10-01

This paper presents the experimental work on distributed temperature sensing making use of Fiber Bragg grating (FBG) array sensor for possible applications in the monitoring of temperature profile in high temperature boilers. A special sensor has been designed for this purpose which consists of four FBGs (of wavelengths λB1 = 1547.28 nm, λB2 = 1555.72 nm, λB3 = 1550.84 nm, λB4 = 1545.92 nm) written in hydrogen loaded fiber in line with a spacing of 15 cm between them. All the FBGs are encapsulated inside a stainless steel tube for avoiding micro cracks using rigid probe technique. The spatial distribution of temperature profile inside a prototype boiler has been measured experimentally both in horizontal and vertical directions employing the above sensor and the results are presented.

Development of GaN-based microchemical sensor nodes

NASA Technical Reports Server (NTRS)

Prokopuk, Nicholas; Son, Kyung-Ah; George, Thomas; Moon, Jeong S.

2005-01-01

Sensors based III-N technology are gaining significant interest due to their potential for monolithic integration of RF transceivers and light sources and the capability of high temperature operations. We are developing a GaN-based micro chemical sensor node for remote detection of chemical toxins, and present electrical responses of AlGaN/GaN HEMT (High Electron Mobility Transistor) sensors to chemical toxins as well as other common gases.

Micro-LiDAR velocity, temperature, density, concentration sensor

NASA Technical Reports Server (NTRS)

Dorrington, Adrian A. (Inventor); Danehy, Paul M. (Inventor)

2010-01-01

A light scatter sensor includes a sensor body in which are positioned a plurality of optical fibers. The sensor body includes a surface, in one end of each of the optical fibers terminates at the surface of the sensor body. One of the optical fibers is an illumination fiber for emitting light. A plurality of second optical fibers are collection fibers for collecting scattered light signals. A light sensor processor is connected to the collection fibers to detect the scattered light signals.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ding, Wenhui; Jiang, Yi; Gao, Ran, E-mail: bitjy@bit.edu.cn

A photonic crystal fiber (PCF) based high-temperature fiber-optic sensor is proposed and experimentally demonstrated. The sensor head is a Fabry-Perot cavity manufactured with a short section of endless single-mode photonic crystal fiber (ESM PCF). The interferometric spectrum of the Fabry-Perot interferometer is collected by a charge coupled device linear array based micro spectrometer. A high-resolution demodulation algorithm is used to interrogate the peak wavelengths. Experimental results show that the temperature range of 1200 °C and the temperature resolution of 1 °C are achieved.

A Radiosonde Using a Humidity Sensor Array with a Platinum Resistance Heater and Multi-Sensor Data Fusion

PubMed Central

Shi, Yunbo; Luo, Yi; Zhao, Wenjie; Shang, Chunxue; Wang, Yadong; Chen, Yinsheng

2013-01-01

This paper describes the design and implementation of a radiosonde which can measure the meteorological temperature, humidity, pressure, and other atmospheric data. The system is composed of a CPU, microwave module, temperature sensor, pressure sensor and humidity sensor array. In order to effectively solve the humidity sensor condensation problem due to the low temperatures in the high altitude environment, a capacitive humidity sensor including four humidity sensors to collect meteorological humidity and a platinum resistance heater was developed using micro-electro-mechanical-system (MEMS) technology. A platinum resistance wire with 99.999% purity and 0.023 mm in diameter was used to obtain the meteorological temperature. A multi-sensor data fusion technique was applied to process the atmospheric data. Static and dynamic experimental results show that the designed humidity sensor with platinum resistance heater can effectively tackle the sensor condensation problem, shorten response times and enhance sensitivity. The humidity sensor array can improve measurement accuracy and obtain a reliable initial meteorological humidity data, while the multi-sensor data fusion technique eliminates the uncertainty in the measurement. The radiosonde can accurately reflect the meteorological changes. PMID:23857263

A radiosonde using a humidity sensor array with a platinum resistance heater and multi-sensor data fusion.

PubMed

Shi, Yunbo; Luo, Yi; Zhao, Wenjie; Shang, Chunxue; Wang, Yadong; Chen, Yinsheng

2013-07-12

This paper describes the design and implementation of a radiosonde which can measure the meteorological temperature, humidity, pressure, and other atmospheric data. The system is composed of a CPU, microwave module, temperature sensor, pressure sensor and humidity sensor array. In order to effectively solve the humidity sensor condensation problem due to the low temperatures in the high altitude environment, a capacitive humidity sensor including four humidity sensors to collect meteorological humidity and a platinum resistance heater was developed using micro-electro-mechanical-system (MEMS) technology. A platinum resistance wire with 99.999% purity and 0.023 mm in diameter was used to obtain the meteorological temperature. A multi-sensor data fusion technique was applied to process the atmospheric data. Static and dynamic experimental results show that the designed humidity sensor with platinum resistance heater can effectively tackle the sensor condensation problem, shorten response times and enhance sensitivity. The humidity sensor array can improve measurement accuracy and obtain a reliable initial meteorological humidity data, while the multi-sensor data fusion technique eliminates the uncertainty in the measurement. The radiosonde can accurately reflect the meteorological changes.

Agarose coated spherical micro resonator for humidity measurements.

PubMed

Mallik, Arun Kumar; Liu, Dejun; Kavungal, Vishnu; Wu, Qiang; Farrell, Gerald; Semenova, Yuliya

2016-09-19

A new type of fiber optic relative humidity (RH) sensor based on an agarose coated silica microsphere resonator is proposed and experimentally demonstrated. Whispering gallery modes (WGMs) in the micro resonator are excited by evanescent coupling using a tapered fiber with ~3.3 µm waist diameter. A change in the relative humidity of the surrounding the resonator air induces changes in the refractive index (RI) and thickness of the Agarose coating layer. These changes in turn lead to a spectral shift of the WGM resonances, which can be related to the RH value after a suitable calibration. Studies of the repeatability, long-term stability, measurement accuracy and temperature dependence of the proposed sensor are carried out. The RH sensitivity of the proposed sensor depends on the concentration of the agarose gel which determines the initial thickness of the deposited coating layer. Studies of the micro- resonators with coating layers fabricated from gels with three different Agarose concentrations of 0.5%, 1.125% and 2.25 wt./vol.% showed that an increase in the initial thickness of the coating material results in an increase in sensitivity but also leads to a decrease of quality factor (Q) of the micro resonator. The highest sensitivity achieved in our experiments was 518 pm/%RH in the RH range from 30% to 70%. The proposed sensor offers the advantages of a very compact form factor, low hysteresis, good repeatability, and low cross sensitivity to temperature.

Army requirements for micro and nanotechnology-based sensors in weapons health and battlefield environmental monitoring applications

NASA Astrophysics Data System (ADS)

Ruffin, Paul; Brantley, Christina; Edwards, Eugene; Hutcheson, Guilford

2006-03-01

The Army Aviation and Missile Research, Development, and Engineering Center (AMRDEC) and the Army Research Laboratory (ARL) have initiated a joint advanced technology demonstration program entitled "Prognostics/Diagnostics for the Future Force (PDFF)" with a key objective of developing low or no power embedded sensor suites for harsh environmental monitoring. The most critical challenge of the program is to specify requirements for the embedded sensor suites which will perform on-board diagnostics, maintain a history of sensor data, and forecast weapon health. The authors are currently collaborating with the PDFF program managers and potential customers to quantify the requirements for remotely operated, micro/nano-technology-based sensors for a host of candidate weapon systems. After requirements are finalized, current micro/nanotechnology-based temperature, humidity, g-shock, vibration and chemical sensors for monitoring the out-gassing of weapons propellant, as well as hazardous gaseous species on the battlefield and in urban environments will be improved to meet the full requirements of the PDFF program. In this paper, performance requirements such as power consumption, reliability, maintainability, survivability, size, and cost, along with the associated technical challenges for micro/nanotechnology-based sensor systems operating in military environments, are discussed. In addition, laboratory results from the design and testing of a wireless sensor array, which was developed using a thin film of functionalized carbon nanotube materials, are presented. Conclusions from the research indicate that the detection of bio-hazardous materials is possible using passive and active wireless sensors based on monitoring the reflected phase from the sensor.

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique.

PubMed

Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

2015-10-23

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

PubMed Central

Fong, Chien-Fu; Dai, Ching-Liang; Wu, Chyan-Chyi

2015-01-01

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm. PMID:26512671

Demonstration of versatile whispering-gallery micro-lasers for remote refractive index sensing.

PubMed

Wan, Lei; Chandrahalim, Hengky; Zhou, Jian; Li, Zhaohui; Chen, Cong; Cho, Sangha; Zhang, Hui; Mei, Ting; Tian, Huiping; Oki, Yuji; Nishimura, Naoya; Fan, Xudong; Guo, L Jay

2018-03-05

We developed chip-scale remote refractive index sensors based on Rhodamine 6G (R6G)-doped polymer micro-ring lasers. The chemical, temperature, and mechanical sturdiness of the fused-silica host guaranteed a flexible deployment of dye-doped polymers for refractive index sensing. The introduction of the dye as gain medium demonstrated the feasibility of remote sensing based on the free-space optics measurement setup. Compared to the R6G-doped TZ-001, the lasing behavior of R6G-doped SU-8 polymer micro-ring laser under an aqueous environment had a narrower spectrum linewidth, producing the minimum detectable refractive index change of 4 × 10 -4 RIU. The maximum bulk refractive index sensitivity (BRIS) of 75 nm/RIU was obtained for SU-8 laser-based refractive index sensors. The economical, rapid, and simple realization of polymeric micro-scale whispering-gallery-mode (WGM) laser-based refractive index sensors will further expand pathways of static and dynamic remote environmental, chemical, biological, and bio-chemical sensing.

Fibre optic technique for simultaneous measurement of strain and temperature variations in composite materials

NASA Astrophysics Data System (ADS)

Michie, W. C.; Culshaw, Brian; Roberts, Scott S. J.; Davidson, Roger

1991-12-01

A technique based upon the differential sensitivities of dual mode and polarimetric sensing schemes is shown to be capable of resolving simultaneously temperature and strain variations to within 20 micro-epsilon and 1 K over a strain and temperature excursion of 2 micro-epsilon and 45 K. The technique is evaluated experimentally over an 80 cm sensing length of unembedded optical fiber and in an 8 ply unidirectional carbon/epoxide laminate subject to temperature and strain cycling. A comparative analysis of the performance of the embedded and the unembedded fiber sensors is presented.

Material Damage System and Method for Determining Same

NASA Technical Reports Server (NTRS)

Okojie, Robert (Inventor)

2017-01-01

A system and method for determining a change in a thickness and temperature of a surface of a material are disclosed herein. The system and the method are usable in a thermal protection system of a space vehicle, such as an aeroshell of a space vehicle. The system and method may incorporate micro electric sensors arranged in a ladder network and capacitor strip sensors. Corrosion or ablation causes a change in an electrical property of the sensors. An amount of or rate of the corrosion or the ablation and a temperature of the material is determined based on the change of the electrical property of the sensors.

Electronic Tongue Containing Redox and Conductivity Sensors

NASA Technical Reports Server (NTRS)

Buehler, Martin

2007-01-01

The Electronic Tongue (E-tongue 2) is an assembly of sensors for measuring concentrations of metal ions and possibly other contaminants in water. Potential uses for electronic tongues include monitoring the chemical quality of water in a variety of natural, industrial, and laboratory settings, and detecting micro-organisms indirectly by measuring microbially influenced corrosion. The device includes a heater, a temperature sensor, an oxidation/reduction (redox) sensor pair, an electrical sensor, an array of eight galvanic cells, and eight ion-specific electrodes.

Micro-Structured Sapphire Fiber Sensors for Simultaneous Measurements of High-T and Dynamic Gas Pressure in Harsh Environments

DOE Office of Scientific and Technical Information (OSTI.GOV)

Xiao, Hai; Tsai, Hai-Lung; Dong, Junhang

2014-09-30

This is the final report for the program “Micro-Structured Sapphire Fiber Sensors for Simultaneous Measurements of High Temperature and Dynamic Gas Pressure in Harsh Environments”, funded by NETL, and performed by Missouri University of Science and Technology, Clemson University and University of Cincinnati from October 1, 2009 to September 30, 2014. Securing a sustainable energy economy by developing affordable and clean energy from coal and other fossil fuels is a central element to the mission of The U.S. Department of Energy’s (DOE) National Energy Technology Laboratory (NETL). To further this mission, NETL funds research and development of novel sensor technologiesmore » that can function under the extreme operating conditions often found in advanced power systems. The main objective of this research program is to conduct fundamental and applied research that will lead to successful development and demonstration of robust, multiplexed, microstructured silica and single-crystal sapphire fiber sensors to be deployed into the hot zones of advanced power and fuel systems for simultaneous measurements of high temperature and gas pressure. The specific objectives of this research program include: 1) Design, fabrication and demonstration of multiplexed, robust silica and sapphire fiber temperature and dynamic gas pressure sensors that can survive and maintain fully operational in high-temperature harsh environments. 2) Development and demonstration of a novel method to demodulate the multiplexed interferograms for simultaneous measurements of temperature and gas pressure in harsh environments. 3) Development and demonstration of novel sapphire fiber cladding and low numerical aperture (NA) excitation techniques to assure high signal integrity and sensor robustness.« less

Micro-differential scanning calorimeter for liquid biological samples

DOE PAGES

Wang, Shuyu; Yu, Shifeng; Siedler, Michael S.; ...

2016-10-20

Here, we developed an ultrasensitive micro-DSC (differential scanning calorimeter) for liquid protein sample characterization. Our design integrated vanadium oxide thermistors and flexible polymer substrates with microfluidics chambers to achieve a high sensitivity (6 V/W), low thermal conductivity (0.7 mW/K), high power resolutions (40 nW), and well-defined liquid volume (1 μl) calorimeter sensor in a compact and cost-effective way. Furthermore, we demonstrated the performance of the sensor with lysozyme unfolding. The measured transition temperature and enthalpy change were in accordance with the previous literature data. This micro-DSC could potentially raise the prospect of high-throughput biochemical measurement by parallel operation with miniaturizedmore » sample consumption.« less

Optical fiber micro-displacement sensor using a refractive index modulation window-assisted reflection fiber taper

NASA Astrophysics Data System (ADS)

Bao, Weijia; Qiao, Xueguang; Yin, Xunli; Rong, Qiangzhou; Wang, Ruohui; Yang, Hangzhou

2017-12-01

We demonstrate a compact fiber-optic quasi-Michelson interferometer (QMI) for micro-displacement measurement. The sensor comprises a micro-structure of a reflection taper tip containing a refractive index modification (RIM) as a coupling window over the interface between core and cladding of the fiber. Femtosecond laser-based direct inscription technique is used to achieve this window inscription and to induce large refractive index change. The RIM acts as a window for the strong coupling and recoupling of core-to-cladding modes. As the core and cladding modes are reflected at the taper tip and coupled back to lead-in fiber, a well-defined interference spectrum is achieved. The spectral intensity exhibits a high micro-bending sensitivity of 4 . 94 dB / μm because of the sensitivity to bending of recoupled intensity of cladding modes. In contrast, the spectral wavelength is insensitive to bending but linearly responds to temperature. The simultaneous measurements, including power-referenced for displacement and wavelength-referenced for temperature, were achieved by selective interference dip monitoring.

Development of a new sensor based on micro-electro-mechanical systems for objective in vivo measurement of the cutaneous temperature: application to foundations.

PubMed

Korichi, Rodolphe; Mac-Mary, Sophie; Elkhyat, Ahmed; Sainthillier, Jean-Marie; Ränsch, Pascal; Humbert, Philippe; Viviant, Eric; Gazano, Germaine; Mahé, Christian

2006-08-01

The purpose of this work was to develop a new sensor for objective in vivo measurement of the cutaneous temperature based on micro-electro-mechanical systems (MEMS), and to compare these performances with those of a classical thermocouple. Research on this new sensor was carried out to allow the quantification of the thermal properties of the made-up skin. Sixteen female subjects divided into two different age groups (18-35 and >50 years old) were recruited for this study. Several zones of the face and forearms were made up at random with foundations containing or not a thermoregulator raw material. The quantity of foundation applied on the skin was standardized and measurements were carried out first before make-up, and then 10 s and 5 min after make-up. The new sensor and the thermocouple were used successively on each zone. The cutaneous temperature was expressed in degrees celsius. The two systems are similar in terms of repeatability and reproducibility, with some differences in sensibility. The data measured by the MEMS sensor appear lower than those measured by the thermocouple. After make-up, the MEMS sensor detects a progressive increase of the temperature in time whereas the thermocouple detects a decrease. We found the same evolution on the face but in a more attenuated way. These results tend to show that the devices do not measure the same phenomenon. The thermocouple appears more sensitive to the thermal response of the made-up surface whereas the MEMS sensor appears more sensitive to the heat transfers in the interface between the skin and make-up.

Hydrothermally grown α-MnO2 interlocked mesoporous micro-cubes of several nanocrystals as selective and sensitive nitrogen dioxide chemoresistive gas sensors

NASA Astrophysics Data System (ADS)

Shinde, Pritamkumar V.; Xia, Qi Xun; Ghule, Balaji G.; Shinde, Nanasaheb M.; Seonghee, Jeong; Kim, Kwang Ho; Mane, Rajaram S.

2018-06-01

The interesting and multifunctional properties of alpha-manganese dioxide (α-MnO2) are considered to be highly sensitive and selective to nitrogen dioxide (NO2) chemresistive gas sensors. The α-MnO2 mesoporous interlocked micro-cubes composed of several interconnected nanocrystals synthesized by a facile and low-cost hydrothermal method on soda-lime glass substrate are envisaged as selective and sensitive NO2 gas sensors. Phase-purity and surface area with pore-size distribution are initially screened. The three-dimensional α-MnO2 mesoporous-cube-based gas sensors tested for NO2 gas from room-temperature (27 °C) to 250 °C have demonstrated 33% response for 100 ppm NO2 levels at 150 °C. The response and recovery time values of the α-MnO2 sensor are found to be 26 s and recovery 91 s, respectively, with high selectivity, good sensitivity, and considerable chemical and environmental stabilities, confirming the gas sensor applications potentiality of α-MnO2 morphology which is a combination of interlocked mesoporous micro-cubes and well-connected nanocrystals.

Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with temperature compensation function

NASA Astrophysics Data System (ADS)

Hasegawa, Y.; Kawaoka, H.; Yamada, T.; Matsushima, M.; Kawabe, T.; Shikida, M.

2017-12-01

We previously proposed an evaluation method for detecting both respiration and heartbeat signals from the airflow at the mouth (Kawaoka et al 201518th Int. Conf. on Solid-State Sensors, Actuators and Microsystems; Kawaoka et al 2015 IEEE Sensors; Kawaoka et al 2016 Technical Digest IEEE Micro Electro Mechanical Systems Conf.). In the current study, we developed a catheter flow sensor with temperature compensation that uses MEMS technologies and used it to directly detect the breathing airflow in the airway of a rat. The temperature sensors were integrated with the catheter flow sensor. Heaters working as airflow and temperature sensors were produced on polymer film by using the same fabrication process so that the temperature coefficients of their resistances would coincide. As a result, the variation in sensor outputs due to the airflow temperature changes ranging from 20 °C to 34 °C was suppressed to less than 2.5%. The developed catheter flow sensor was inserted into the airway of a rat to detect both respiration and heartbeat signals. The accuracy of the breathing airflow measurements was improved thanks to the temperature compensation. The tidal volume variations between the expired and inspired air were suppressed to within 5%. Heartbeat signal information was extracted from the measured breathing waveforms by applying a discrete Fourier transform.

Characteristics research of pressure sensor based on nanopolysilicon thin films resistors

NASA Astrophysics Data System (ADS)

Zhao, Xiaofeng; Li, Dandan; Wen, Dianzhong

2017-10-01

To further improve the sensitivity temperature characteristics of pressure sensor, a kind of pressure sensor taking nanopolysilicon thin films as piezoresistors is proposed in this paper. On the basis of the microstructure analysis by X-ray diffraction (XRD) and scanning electron microscope (SEM) tests, the preparing process of nanopolysilicon thin films is optimized. The effects of film thickness and annealing temperature on the micro-structure of nanopolysilicon thin films were studied, respectively. In order to realize the measurement of external pressure, four nanopolysilicon thin films resistors were arranged at the edges of square silicon diaphragm connected to a Wheatstone bridge, and the chip of the sensor was designed and fabricated on a 〈100〉 orientation silicon wafer by microelectromechanical system (MEMS) technology. Experimental result shows that when I = 6.80 mA, the sensitivity of the sensor PS-1 is 0.308 mV/kPa, and the temperature coefficient of sensitivity (TCS) is about -1742 ppm/∘C in the range of -40-140∘C. It is possible to obviously improve the sensitivity temperature characteristics of pressure sensor by the proposed sensors.

Integrated Temperature and Hydrogen Sensors with MEMS Technology

PubMed Central

Jiang, Hongchuan; Huang, Min; Yu, Yibing; Tian, Xiaoyu; Zhang, Wanli; Zhang, Jianfeng; Huang, Yifan; Yu, Kun

2017-01-01

In this work, a PdNi thin film hydrogen gas sensor with integrated Pt thin film temperature sensor was designed and fabricated using the micro-electro-mechanical system (MEMS) process. The integrated sensors consist of two resistors: the former, based on Pt film, is used as a temperature sensor, while the latter had the function of hydrogen sensing and is based on PdNi alloy film. The temperature coefficient of resistance (TCR) in both devices was measured and the output response of the PdNi film hydrogen sensor was calibrated based on the temperature acquired by the Pt temperature sensor. The SiN layer was deposited on top of Pt film to inhibit the hydrogen diffusion and reduce consequent disturbance on temperature measurement. The TCR of the PdNi film and the Pt film was about 0.00122/K and 0.00217/K, respectively. The performances of the PdNi film hydrogen sensor were investigated with hydrogen concentrations from 0.3% to 3% on different temperatures from 294.7 to 302.2 K. With the measured temperature of the Pt resistor and the TCR of the PdNi film, the impact of the temperature on the performances of the PdNi film hydrogen sensor was reduced. The output response, response time and recovery time of the PdNi film hydrogen sensors under the hydrogen concentration of 0.5%, 1.0%, 1.5% and 2.0% were measured at 313 K. The output response of the PdNi thin film hydrogen sensors increased with increasing hydrogen concentration while the response time and recovery time decreased. A cycling test between pure nitrogen and 3% hydrogen concentration was performed at 313 K and PdNi thin film hydrogen sensor demonstrated great repeatability in the cycling test. PMID:29301220

Incorporation of beams into bossed diaphragm for a high sensitivity and overload micro pressure sensor

NASA Astrophysics Data System (ADS)

Yu, Zhongliang; Zhao, Yulong; Sun, Lu; Tian, Bian; Jiang, Zhuangde

2013-01-01

The paper presents a piezoresistive absolute micro pressure sensor, which is of great benefits for altitude location. In this investigation, the design, fabrication, and test of the sensor are involved. By analyzing the stress distribution of sensitive elements using finite element method, a novel structure through the introduction of sensitive beams into traditional bossed diaphragm is built up. The proposed configuration presents its advantages in terms of high sensitivity and high overload resistance compared with the conventional bossed diaphragm and flat diaphragm structures. Curve fittings of surface stress and deflection based on ANSYS simulation results are performed to establish the equations about the sensor. Nonlinear optimization by MATLAB is carried out to determine the structure dimensions. The output signals in both static and dynamic environments are evaluated. Silicon bulk micromachining technology is utilized to fabricate the sensor prototype, and the fabrication process is discussed. Experimental results demonstrate the sensor features a high sensitivity of 11.098 μV/V/Pa in the operating range of 500 Pa at room temperature, and a high overload resistance of 200 times overpressure to promise its survival under atmosphere. Due to the excellent performance above, the sensor can be applied in measuring the absolute micro pressure lower than 500 Pa.

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

PubMed Central

Dai, Ching-Liang; Chen, Yen-Chi; Wu, Chyan-Chyi; Kuo, Chin-Fu

2010-01-01

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively. PMID:22294897

Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip.

PubMed

Dai, Ching-Liang; Chen, Yen-Chi; Wu, Chyan-Chyi; Kuo, Chin-Fu

2010-01-01

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.

Dissolved oxygen measurements in aquatic environments: the effects of changing temperature and pressure on three sensor technologies.

PubMed

Markfort, Corey D; Hondzo, Miki

2009-01-01

Dissolved oxygen (DO) is probably the most important parameter related to water quality and biological habitat in aquatic environments. In situ DO sensors are some of the most valuable tools used by scientists and engineers for the evaluation of water quality in aquatic ecosystems. Presently, we cannot accurately measure DO concentrations under variable temperature and pressure conditions. Pressure and temperature influence polarographic and optical type DO sensors compared to the standard Winkler titration method. This study combines laboratory and field experiments to compare and quantify the accuracy and performance of commercially available macro and micro Clark-type oxygen sensors as well as optical sensing technology to the Winkler method under changing pressure and temperature conditions. Field measurements at various lake depths revealed sensor response time up to 11 min due to changes in water temperature, pressure, and DO concentration. Investigators should account for transient response in DO sensors before measurements are collected at a given location. We have developed an effective model to predict the transient response time for Clark-type oxygen sensors. The proposed procedure increases the accuracy of DO data collected in situ for profiling applications.

Data Exploration using Unsupervised Feature Extraction for Mixed Micro-Seismic Signals

NASA Astrophysics Data System (ADS)

Meyer, Matthias; Weber, Samuel; Beutel, Jan

2017-04-01

We present a system for the analysis of data originating in a multi-sensor and multi-year experiment focusing on slope stability and its underlying processes in fractured permafrost rock walls undertaken at 3500m a.s.l. on the Matterhorn Hörnligrat, (Zermatt, Switzerland). This system incorporates facilities for the transmission, management and storage of large-scales of data ( 7 GB/day), preprocessing and aggregation of multiple sensor types, machine-learning based automatic feature extraction for micro-seismic and acoustic emission data and interactive web-based visualization of the data. Specifically, a combination of three types of sensors are used to profile the frequency spectrum from 1 Hz to 80 kHz with the goal to identify the relevant destructive processes (e.g. micro-cracking and fracture propagation) leading to the eventual destabilization of large rock masses. The sensors installed for this profiling experiment (2 geophones, 1 accelerometers and 2 piezo-electric sensors for detecting acoustic emission), are further augmented with sensors originating from a previous activity focusing on long-term monitoring of temperature evolution and rock kinematics with the help of wireless sensor networks (crackmeters, cameras, weather station, rock temperature profiles, differential GPS) [Hasler2012]. In raw format, the data generated by the different types of sensors, specifically the micro-seismic and acoustic emission sensors, is strongly heterogeneous, in part unsynchronized and the storage and processing demand is large. Therefore, a purpose-built signal preprocessing and event-detection system is used. While the analysis of data from each individual sensor follows established methods, the application of all these sensor types in combination within a field experiment is unique. Furthermore, experience and methods from using such sensors in laboratory settings cannot be readily transferred to the mountain field site setting with its scale and full exposure to the natural environment. Consequently, many state-of-the-art algorithms for big data analysis and event classification requiring a ground truth dataset cannot be applied. The above mentioned challenges require a tool for data exploration. In the presented system, data exploration is supported by unsupervised feature learning based on convolutional neural networks, which is used to automatically extract common features for preliminary clustering and outlier detection. With this information, an interactive web-tool allows for a fast identification of interesting time segments on which segment-selective algorithms for visualization, feature extraction and statistics can be applied. The combination of manual labeling based and unsupervised feature extraction provides an event catalog for classification of different characteristic events related to internal progression of micro-crack in steep fractured bedrock permafrost. References Hasler, A., S. Gruber, and J. Beutel (2012), Kinematics of steep bedrock permafrost, J. Geophys. Res., 117, F01016, doi:10.1029/2011JF001981.

Morphology-Dependent Resonances and Their Applications to Sensing in Aerospace Environments

NASA Technical Reports Server (NTRS)

Adamovsky, G.; Otugen, M.V.

2009-01-01

This paper reviews recent developments in Morphology-Dependent Resonance (MDR)-based sensors for aerospace applications. The sensor concept is based on the detection of small shifts of optical resonances (also called the whispering gallery modes or WGM) of dielectric spheres caused by external effects. Recent developments in MRD-based micro-optical sensors for temperature, force, pressure, and concentration are discussed. In addition to the experimental configurations used in each type of prototype sensor, a brief overview is also given for analytical approaches to describe the sensor principle.

Differential wide temperature range CMOS interface circuit for capacitive MEMS pressure sensors.

PubMed

Wang, Yucai; Chodavarapu, Vamsy P

2015-02-12

We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between -55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%.

Differential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors

PubMed Central

Wang, Yucai; Chodavarapu, Vamsy P.

2015-01-01

We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between −55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degradation at high temperatures. The circuit offers the flexibility to interface with MEMS sensors with a wide range of the steady-state capacitance values from 0.5 pF to 10 pF. Simulation results show that the circuitry has excellent linearity and stability over the wide temperature range. Experimental results confirm that the temperature effects on the circuitry are small, with an overall linearity error around 2%. PMID:25686312

CO Sensing Performance of a Micro Thermoelectric Gas Sensor with AuPtPd/SnO₂ Catalyst and Effects of a Double Catalyst Structure with Pt/α-Al₂O₃.

PubMed

Goto, Tomoyo; Itoh, Toshio; Akamatsu, Takafumi; Shin, Woosuck

2015-12-15

The CO sensing properties of a micro thermoelectric gas sensor (micro-TGS) with a double AuPtPd/SnO₂ and Pt/α-Al₂O₃ catalyst were investigated. While several nanometer sized Pt and Pd particles were uniformly dispersed on SnO₂, the Au particles were aggregated as particles measuring >10 nm in diameter. In situ diffuse reflectance Fourier transform Infrared spectroscopy (DRIFT) analysis of the catalyst showed a CO adsorption peak on Pt and Pd, but no clear peak corresponding to the interaction between CO and Au was detected. Up to 200 °C, CO combustion was more temperature dependent than that of H₂, while H₂ combustion was activated by repeated exposure to H₂ gas during the periodic gas test. Selective CO sensing of the micro-TGS against H₂ was attempted using a double catalyst structure with 0.3-30 wt% Pt/α-Al₂O₃ as a counterpart combustion catalyst. The sensor output of the micro-TGS decreased with increasing Pt content in the Pt/α-Al₂O₃ catalyst, by cancelling out the combustion heat from the AuPtPd/SnO₂ catalyst. In addition, the AuPtPd/SnO₂ and 0.3 wt% Pt/α-Al₂O₃ double catalyst sensor showed good and selective CO detection. We therefore demonstrated that our micro-TGS with double catalyst structure is useful for controlling the gas selectivity of CO against H₂.

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems

PubMed Central

Helwig, Andreas; Hackner, Angelika; Zappa, Dario; Sberveglieri, Giorgio

2018-01-01

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R0, and under gas exposure, Rgas, to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response Resp=(R0−Rgas)/R0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors. PMID:29401673

High-Performance Flexible Force and Temperature Sensing Array with a Robust Structure

NASA Astrophysics Data System (ADS)

Kim, Min-Seok; Song, Han-Wook; Park, Yon-Kyu

We have developed a flexible tactile sensor array capable of sensing physical quantities, e.g. force and temperature with high-performances and high spatial resolution. The fabricated tactile sensor consists of 8 × 8 force measuring array with 1 mm spacing and a thin metal (copper) temperature sensor. The flexible force sensing array consists of sub-millimetre-size bar-shaped semi-conductor strain gage array attached to a thin and flexible printed circuit board covered by stretchable elastomeric material on both sides. This design incorporates benefits of both materials; the semi-conductor's high performance and the polymer's mechanical flexibility and robustness, while overcoming their drawbacks of those two materials. Special fabrication processes, so called “dry-transfer technique” have been used to fabricate the tactile sensor along with standard micro-fabrication processes.

Respiration detection chip with integrated temperature-insensitive MEMS sensors and CMOS signal processing circuits.

PubMed

Wei, Chia-Ling; Lin, Yu-Chen; Chen, Tse-An; Lin, Ren-Yi; Liu, Tin-Hao

2015-02-01

An airflow sensing chip, which integrates MEMS sensors with their CMOS signal processing circuits into a single chip, is proposed for respiration detection. Three micro-cantilever-based airflow sensors were designed and fabricated using a 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Two main differences were present among these three designs: they were either metal-covered or metal-free structures, and had either bridge-type or fixed-type reference resistors. The performances of these sensors were measured and compared, including temperature sensitivity and airflow sensitivity. Based on the measured results, the metal-free structure with fixed-type reference resistors is recommended for use, because it has the highest airflow sensitivity and also can effectively reduce the output voltage drift caused by temperature change.

A temperature controller board for the ARC controller

NASA Astrophysics Data System (ADS)

Tulloch, Simon

2016-07-01

A high-performance temperature controller board has been produced for the ARC Generation-3 CCD controller. It contains two 9W temperature servo loops and four temperature input channels and is fully programmable via the ARC API and OWL data acquisition program. PI-loop control is implemented in an on-board micro. Both diode and RTD sensors can be used. Control and telemetry data is sent via the ARC backplane although a USB-2 interface is also available. Further functionality includes hardware timers and high current drivers for external shutters and calibration LEDs, an LCD display, a parallel i/o port, a pressure sensor interface and an uncommitted analogue telemetry input.

RETRACTED ARTICLE: Quasi-distributed fiber bragg grating array sensor for furnace applications

NASA Astrophysics Data System (ADS)

Reddy, P. Saidi; Sai Prasad, R. L. N.; Sen Gupta, D.; Sai Shankar, M.; Srimannarayana, K.; Ravinder Reddy, P.

2012-05-01

An experimental work on distributed temperature sensing making use of the fiber Bragg grating (FBG) array sensor for possible applications in the monitoring of the temperature profile in high temperature boilers is presented. A special sensor has been designed for this purpose which consists of four FBGs (of wavelengths λ B1 =1545.8 nm, λ B2 =1547 nm, λ B3 =1550.8 nm, λ B4 =1555.5 nm at 30 °C) written in the hydrogen-loaded fiber in line. All the FBGs are encapsulated inside a stainless steel tube using the rigid probe technique for avoiding micro cracks. The spatial distribution of the temperature profile inside a prototype boiler was measured experimentally both in horizontal and vertical directions employing the above sensor, and the results are presented. Further, the finite element simulation has been carried out by using ANSYS R11 software to predict temperature contours in the boiler, and the experimental and predicted results were found to be closely matching.

Fiber Optic Based Thermometry System for Superconducting RF Cavities

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kochergin, Vladimir

2013-05-06

Thermometry is recognized as the best technique to identify and characterize losses in SRF cavities. The most widely used and reliable apparatus for temperature mapping at cryogenic temperatures is based on carbon resistors (RTDs). The use of this technology on multi-cell cavities is inconvenient due to the very large number of sensors required to obtain sufficient spatial resolution. Recent developments make feasible the use of multiplexible fiber optic sensors for highly distributed temperature measurements. However, sensitivity of multiplexible cryogenic temperature sensors was found extending only to 12K at best and thus was not sufficient for SRF cavity thermometry. During themore » course of the project the team of MicroXact, JLab and Virginia Tech developed and demonstrated the multiplexible fiber optic sensor with adequate response below 20K. The demonstrated temperature resolution is by at least a factor of 60 better than that of the best multiplexible fiber optic temperature sensors reported to date. The clear path toward at least 10times better temperature resolution is shown. The first to date temperature distribution measurements with ~2.5mm spatial resolution was done with fiber optic sensors at 2K to4K temperatures. The repeatability and accuracy of the sensors were verified only at 183K, but at this temperature both parameters significantly exceeded the state of the art. The results of this work are expected to find a wide range of applications, since the results are enabling the whole new testing capabilities, not accessible before.« less

Microfabricated Chemical Sensors for Safety and Emission Control Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Knight, D.; Liu, C. C.; Wu, Q. H.

1998-01-01

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

Recent Improvement of Medical Optical Fibre Pressure and Temperature Sensors.

PubMed

Poeggel, Sven; Duraibabu, Dineshbabu; Kalli, Kyriacos; Leen, Gabriel; Dooly, Gerard; Lewis, Elfed; Kelly, Jimmy; Munroe, Maria

2015-07-13

This investigation describes a detailed analysis of the fabrication and testing of optical fibre pressure and temperature sensors (OFPTS). The optical sensor of this research is based on an extrinsic Fabry-Perot interferometer (EFPI) with integrated fibre Bragg grating (FBG) for simultaneous pressure and temperature measurements. The sensor is fabricated exclusively in glass and with a small diameter of 0.2 mm, making it suitable for volume-restricted bio-medical applications. Diaphragm shrinking techniques based on polishing, hydrofluoric (HF) acid and femtosecond (FS) laser micro-machining are described and analysed. The presented sensors were examined carefully and demonstrated a pressure sensitivity in the range of sp = 2-10 nm/kPa and a resolution of better than ΔP = 10 Pa protect (0.1 cm H2O). A static pressure test in 38 cm H2O shows no drift of the sensor in a six-day period. Additionally, a dynamic pressure analysis demonstrated that the OFPTS never exceeded a drift of more than 130 Pa (1.3 cm H2O) in a 12-h measurement, carried out in a cardiovascular simulator. The temperature sensitivity is given by k = 10.7 pm/K, which results in a temperature resolution of better than ΔT = 0.1 K. Since the temperature sensing element is placed close to the pressure sensing element, the pressure sensor is insensitive to temperature changes.

Recent Improvement of Medical Optical Fibre Pressure and Temperature Sensors

PubMed Central

Poeggel, Sven; Duraibabu, Dineshbabu; Kalli, Kyriacos; Leen, Gabriel; Dooly, Gerard; Lewis, Elfed; Kelly, Jimmy; Munroe, Maria

2015-01-01

This investigation describes a detailed analysis of the fabrication and testing of optical fibre pressure and temperature sensors (OFPTS). The optical sensor of this research is based on an extrinsic Fabry–Perot interferometer (EFPI) with integrated fibre Bragg grating (FBG) for simultaneous pressure and temperature measurements. The sensor is fabricated exclusively in glass and with a small diameter of 0.2 mm, making it suitable for volume-restricted bio-medical applications. Diaphragm shrinking techniques based on polishing, hydrofluoric (HF) acid and femtosecond (FS) laser micro-machining are described and analysed. The presented sensors were examined carefully and demonstrated a pressure sensitivity in the range of sp = 2–10 nmkPa and a resolution of better than ΔP = 10 Pa (0.1 cm H2O). A static pressure test in 38 cmH2O shows no drift of the sensor in a six-day period. Additionally, a dynamic pressure analysis demonstrated that the OFPTS never exceeded a drift of more than 130 Pa (1.3 cm H2O) in a 12-h measurement, carried out in a cardiovascular simulator. The temperature sensitivity is given by k=10.7 pmK, which results in a temperature resolution of better than ΔT = 0.1 K. Since the temperature sensing element is placed close to the pressure sensing element, the pressure sensor is insensitive to temperature changes. PMID:26184331

On-Line Temperature Estimation for Noisy Thermal Sensors Using a Smoothing Filter-Based Kalman Predictor

PubMed Central

Li, Zhi; Wei, Henglu; Zhou, Wei; Duan, Zhemin

2018-01-01

Dynamic thermal management (DTM) mechanisms utilize embedded thermal sensors to collect fine-grained temperature information for monitoring the real-time thermal behavior of multi-core processors. However, embedded thermal sensors are very susceptible to a variety of sources of noise, including environmental uncertainty and process variation. This causes the discrepancies between actual temperatures and those observed by on-chip thermal sensors, which seriously affect the efficiency of DTM. In this paper, a smoothing filter-based Kalman prediction technique is proposed to accurately estimate the temperatures from noisy sensor readings. For the multi-sensor estimation scenario, the spatial correlations among different sensor locations are exploited. On this basis, a multi-sensor synergistic calibration algorithm (known as MSSCA) is proposed to improve the simultaneous prediction accuracy of multiple sensors. Moreover, an infrared imaging-based temperature measurement technique is also proposed to capture the thermal traces of an advanced micro devices (AMD) quad-core processor in real time. The acquired real temperature data are used to evaluate our prediction performance. Simulation shows that the proposed synergistic calibration scheme can reduce the root-mean-square error (RMSE) by 1.2 ∘C and increase the signal-to-noise ratio (SNR) by 15.8 dB (with a very small average runtime overhead) compared with assuming the thermal sensor readings to be ideal. Additionally, the average false alarm rate (FAR) of the corrected sensor temperature readings can be reduced by 28.6%. These results clearly demonstrate that if our approach is used to perform temperature estimation, the response mechanisms of DTM can be triggered to adjust the voltages, frequencies, and cooling fan speeds at more appropriate times. PMID:29393862

On-Line Temperature Estimation for Noisy Thermal Sensors Using a Smoothing Filter-Based Kalman Predictor.

PubMed

Li, Xin; Ou, Xingtao; Li, Zhi; Wei, Henglu; Zhou, Wei; Duan, Zhemin

2018-02-02

Dynamic thermal management (DTM) mechanisms utilize embedded thermal sensors to collect fine-grained temperature information for monitoring the real-time thermal behavior of multi-core processors. However, embedded thermal sensors are very susceptible to a variety of sources of noise, including environmental uncertainty and process variation. This causes the discrepancies between actual temperatures and those observed by on-chip thermal sensors, which seriously affect the efficiency of DTM. In this paper, a smoothing filter-based Kalman prediction technique is proposed to accurately estimate the temperatures from noisy sensor readings. For the multi-sensor estimation scenario, the spatial correlations among different sensor locations are exploited. On this basis, a multi-sensor synergistic calibration algorithm (known as MSSCA) is proposed to improve the simultaneous prediction accuracy of multiple sensors. Moreover, an infrared imaging-based temperature measurement technique is also proposed to capture the thermal traces of an advanced micro devices (AMD) quad-core processor in real time. The acquired real temperature data are used to evaluate our prediction performance. Simulation shows that the proposed synergistic calibration scheme can reduce the root-mean-square error (RMSE) by 1.2 ∘ C and increase the signal-to-noise ratio (SNR) by 15.8 dB (with a very small average runtime overhead) compared with assuming the thermal sensor readings to be ideal. Additionally, the average false alarm rate (FAR) of the corrected sensor temperature readings can be reduced by 28.6%. These results clearly demonstrate that if our approach is used to perform temperature estimation, the response mechanisms of DTM can be triggered to adjust the voltages, frequencies, and cooling fan speeds at more appropriate times.

SiC Sensors in Extreme Environments: Real-time Hydrogen Monitoring for Energy Plant Applications

NASA Astrophysics Data System (ADS)

Ghosh, Ruby

2008-03-01

Clean, efficient energy production, such as the gasification of coal (syngas), requires physical and chemical sensors for exhaust gas monitoring as well as real-time control of the combustion process. Wide-bandgap semiconducting materials systems can meet the sensing demands in these extreme environments consisting of chemically corrosive gases at high temperature and pressure. We have developed a SiC based micro-sensor for detection of hydrogen containing species with millisecond response at 600 C. The sensor is a Pt-SiO2-SiC device with a dense Pt catalytic sensing film, capable of withstanding months of continuous high temperature operation. The device was characterized in robust sensing module that is compatible with an industrial reactor. We report on the performance of the SiC sensor in a simulated syngas ambient at 370 C containing the common interferants CO2, CH4 and CO [1]. In addition we demonstrate that hours of exposure to >=1000 ppm H2S and 15% water vapor does not degrade the sensor performance. To elucidate the mechanisms responsible for the hydrogen response of the sensor we have modeled the hydrogen adsorptions kinetics at the internal Pt-SiO2 interface, using both the Tempkin and Langmuir isotherms. Under the conditions appropriate for energy plant applications, the response of our sensor is significantly larger than that obtained from ultra-high vacuum electrochemical sensor measurements at high temperatures. We will discuss the role of morphology, at the nano to micro scale, on the enhanced catalytic activity observed for our Pt sensing films in response to a heated hydrogen gas stream at atmospheric pressure. [1] R. Loloee, B. Chorpening, S. Beers & R. Ghosh, Hydrogen monitoring for power plant applications using SiC sensors, Sens. Actuators B:Chem. (2007), doi:10.1016/j.snb.2007.07.118

Self-Powered Wireless Sensors

NASA Technical Reports Server (NTRS)

Dynys, Fred; Sayir, Ali

2008-01-01

NASA's integrated vehicle health management (IVHM) program offers the potential to improve aeronautical safety, reduce cost and improve performance by utilizing networks of wireless sensors. Development of sensor systems for engine hot sections will provide real-time data for prognostics and health management of turbo-engines. Sustainable power to embedded wireless sensors is a key challenge for prolong operation. Harvesting energy from the environment has emerged as a viable technique for power generation. Thermoelectric generators provide a direct conversion of heat energy to electrical energy. Micro-power sources derived from thermoelectric films are desired for applications in harsh thermal environments. Silicon based alloys are being explored for applications in high temperature environments containing oxygen. Chromium based p-type Si/Ge alloys exhibit Seebeck coefficients on the order of 160 micro V/K and low thermal conductance of 2.5 to 5 W/mK. Thermoelectric properties of bulk and thin film silicides will be discussed

Dual spherical single-mode-multimode-single-mode optical fiber temperature sensor based on a Mach–Zehnder interferometer

NASA Astrophysics Data System (ADS)

Tan, Jianchang; Feng, Guoying; Zhang, Shulin; Liang, Jingchuan; Li, Wei; Luo, Yun

2018-07-01

A dual spherical single-mode-multimode-single-mode (DSSMS) optical fiber temperature sensor based on a Mach–Zehnder interferometer (MZI) was designed and implemented in this paper. Theoretical and experimental results indicated that the LP01 mode in the core and the LP09 mode excited by the spherical structure were maintained and transmitted via multimode fiber and interfered at the second spherical structure, resulting in the interference spectrum. An increase or decrease in temperature can cause significant red-shift or blue-shift of the spectrum, respectively. The linearity of the spectral shift due to the temperature change is ~0.999, the sensitivity at 30 °C–540 °C is ~37.372 pm °C‑3, and at  ‑25 °C–25 °C is ~37.28 pm °C‑1. The reproducibility error of this all-fiber temperature sensor at 30 °C–540 °C is less than 0.15%. Compared with the optical fiber sensor with a tapered structure and fiber core offset structure, this MZI-based DSSMS optical fiber temperature sensor has higher mechanical strength. Moreover, benefiting from low-cost and environmentally friendly materials, it is expected to be a novel micro-nano all-fiber sensor.

All-fiber, long-active-length Fabry-Perot strain sensor.

PubMed

Pevec, Simon; Donlagic, Denis

2011-08-01

This paper presents a high-sensitivity, all-silica, all-fiber Fabry-Perot strain-sensor. The proposed sensor provides a long active length, arbitrary length of Fabry-Perot cavity, and low intrinsic temperature sensitivity. The sensor was micro-machined from purposely-developed sensor-forming fiber that is etched and directly spliced to the lead-in fiber. This manufacturing process has good potential for cost-effective, high-volume production. Its measurement range of over 3000 µε, and strain-resolution better than 1 µε were demonstrated by the application of a commercial, multimode fiber-based signal processor.

Flexible MEMS: A novel technology to fabricate flexible sensors and electronics

NASA Astrophysics Data System (ADS)

Tu, Hongen

This dissertation presents the design and fabrication techniques used to fabricate flexible MEMS (Micro Electro Mechanical Systems) devices. MEMS devices and CMOS(Complementary Metal-Oxide-Semiconductor) circuits are traditionally fabricated on rigid substrates with inorganic semiconductor materials such as Silicon. However, it is highly desirable that functional elements like sensors, actuators or micro fluidic components to be fabricated on flexible substrates for a wide variety of applications. Due to the fact that flexible substrate is temperature sensitive, typically only low temperature materials, such as polymers, metals, and organic semiconductor materials, can be directly fabricated on flexible substrates. A novel technology based on XeF2(xenon difluoride) isotropic silicon etching and parylene conformal coating, which is able to monolithically incorporate high temperature materials and fluidic channels, was developed at Wayne State University. The technology was first implemented in the development of out-of-plane parylene microneedle arrays that can be individually addressed by integrated flexible micro-channels. These devices enable the delivery of chemicals with controlled temporal and spatial patterns and allow us to study neurotransmitter-based retinal prosthesis. The technology was further explored by adopting the conventional SOI-CMOS processes. High performance and high density CMOS circuits can be first fabricated on SOI wafers, and then be integrated into flexible substrates. Flexible p-channel MOSFETs (Metal-Oxide-Semiconductor Field-Effect-Transistors) were successfully integrated and tested. Integration of pressure sensors and flow sensors based on single crystal silicon has also been demonstrated. A novel smart yarn technology that enables the invisible integration of sensors and electronics into fabrics has been developed. The most significant advantage of this technology is its post-MEMS and post-CMOS compatibility. Various high-performance MEMS devices and electronics can be integrated into flexible substrates. The potential of our technology is enormous. Many wearable and implantable devices can be developed based on this technology.

Optical hydrogen sensors based on metal-hydrides

NASA Astrophysics Data System (ADS)

Slaman, M.; Westerwaal, R.; Schreuders, H.; Dam, B.

2012-06-01

For many hydrogen related applications it is preferred to use optical hydrogen sensors above electrical systems. Optical sensors reduce the risk of ignition by spark formation and are less sensitive to electrical interference. Currently palladium and palladium alloys are used for most hydrogen sensors since they are well known for their hydrogen dissociation and absorption properties at relatively low temperatures. The disadvantages of palladium in sensors are the low optical response upon hydrogen loading, the cross sensitivity for oxygen and carbon, the limited detection range and the formation of micro-cracks after some hydrogen absorption/desorption cycles. In contrast to Pd, we find that the use of magnesium or rear earth bases metal-hydrides in optical hydrogen sensors allow tuning of the detection levels over a broad pressure range, while maintaining a high optical response. We demonstrate a stable detection layer for detecting hydrogen below 10% of the lower explosion limit in an oxygen rich environment. This detection layer is deposited at the bare end of a glass fiber as a micro-mirror and is covered with a thin layer of palladium. The palladium layer promotes the hydrogen uptake at room temperature and acts as a hydrogen selective membrane. To protect the sensor for a long time in air a final layer of a hydrophobic fluorine based coating is applied. Such a sensor can be used for example as safety detector in automotive applications. We find that this type of fiber optic hydrogen sensor is also suitable for hydrogen detection in liquids. As example we demonstrate a sensor for detecting a broad range of concentrations in transformer oil. Such a sensor can signal a warning when sparks inside a high voltage power transformer decompose the transformer oil over a long period.

Micro-incubator for bacterial biosensing applications

NASA Astrophysics Data System (ADS)

Clasen, Estine; Land, Kevin; Joubert, Trudi-Heleen

2016-02-01

The presence of Escherichia coli (E. coli ) is a commonly used indicator micro-organism to determine whether water is safe for human consumption.1 This paper discusses the design of a micro-incubator that can be applied to concentrate bacteria prior to environmental water quality screening tests. High sensitivity and rapid test time is essential and there is a great need for these tests to be implemented on-site without the use of a laboratory infrastructure. In the light of these requirements, a mobile micro-incubator was designed, manufactured and characterised. A polydimethylsiloxane (PDMS) receptacle has been designed to house the 1-5 ml cell culture sample.2 A nano-silver printed electronics micro-heater has been designed to incubate the bacterial sample, with an array of temperature sensors implemented to accurately measure the sample temperature at various locations in the cell culture well. The micro-incubator limits the incubation temperature range to 37+/-3 °C in order to ensure near optimal growth of the bacteria at all times.3 The incubation time is adjustable between 30 minutes and 9 hours with a maximum rise time of 15 minutes to reach the set-point temperature. The surface area of the printed nano silver heating element is 500 mm2. Electrical and COMSOL Multiphysics simulations are included in order to give insight on micro-incubator temperature control. The design and characterization of this micro-incubator allows for further research in biosensing applications.

Carbon nanotubes based methanol sensor for fuel cells application.

PubMed

Kim, D W; Lee, J S; Lee, G S; Overzet, L; Kozlov, M; Aliev, A E; Park, Y W; Yang, D J

2006-11-01

An electrochemical sensor is built using vertically grown multi-walled carbon nanotubes (MWNTs) micro-array to detect methanol concentration in water. This study is done for the potential use of the array as methanol sensor for portable units of direct methanol fuel cells (DMFCs). Platinum (Pt) nanoparticles electro-deposited CNTs (Pt/CNTs) electrode shows high sensitivity in the measurement of methanol concentration in water with cyclic voltammetry (CV) measurement at room temperature. Further investigation has also been undertaken to measure the concentration by changing the amount of the mixture of methanol and formic acid in water. We compared the performance of our micro array sensor built with Pt/CNTs electrodes versus that of Pt wire electrode using CV measurement. We found that our Pt/CNTs array sensor shows high sensitivity and detects methanol concentrations in the range of 0.04 M to 0.10 M. In addition, we found that co-use of formic acid as electrolyte enables us to measure up to 1.0 M methanol concentration.

Sensors for low temperature application

DOEpatents

Henderson, Timothy M.; Wuttke, Gilbert H.

1977-01-01

A method and apparatus for low temperature sensing which uses gas filled micro-size hollow glass spheres that are exposed in a confined observation area to a low temperature range (Kelvin) and observed microscopically to determine change of state, i.e., change from gaseous state of the contained gas to condensed state. By suitable indicia and classification of the spheres in the observation area, the temperature can be determined very accurately.

Hair-based sensors for micro-autonomous systems

NASA Astrophysics Data System (ADS)

Sadeghi, Mahdi M.; Peterson, Rebecca L.; Najafi, Khalil

2012-06-01

We seek to harness microelectromechanical systems (MEMS) technologies to build biomimetic devices for low-power, high-performance, robust sensors and actuators on micro-autonomous robot platforms. Hair is used abundantly in nature for a variety of functions including balance and inertial sensing, flow sensing and aerodynamic (air foil) control, tactile and touch sensing, insulation and temperature control, particle filtering, and gas/chemical sensing. Biological hairs, which are typically characterized by large surface/volume ratios and mechanical amplification of movement, can be distributed in large numbers over large areas providing unprecedented sensitivity, redundancy, and stability (robustness). Local neural transduction allows for space- and power-efficient signal processing. Moreover by varying the hair structure and transduction mechanism, the basic hair form can be used for a wide diversity of functions. In this paper, by exploiting a novel wafer-level, bubble-free liquid encapsulation technology, we make arrays of micro-hydraulic cells capable of electrostatic actuation and hydraulic amplification, which enables high force/high deflection actuation and extremely sensitive detection (sensing) at low power. By attachment of cilia (hair) to the micro-hydraulic cell, air flow sensors with excellent sensitivity (< few cm/s) and dynamic range (> 10 m/s) have been built. A second-generation design has significantly reduced the sensor response time while maintaining sensitivity of about 2 cm/s and dynamic range of more than 15 m/s. These sensors can be used for dynamic flight control of flying robots or for situational awareness in surveillance applications. The core biomimetic technologies developed are applicable to a broad range of sensors and actuators.

A CMOS smart temperature and humidity sensor with combined readout.

PubMed

Eder, Clemens; Valente, Virgilio; Donaldson, Nick; Demosthenous, Andreas

2014-09-16

A fully-integrated complementary metal-oxide semiconductor (CMOS) sensor for combined temperature and humidity measurements is presented. The main purpose of the device is to monitor the hermeticity of micro-packages for implanted integrated circuits and to ensure their safe operation by monitoring the operating temperature and humidity on-chip. The smart sensor has two modes of operation, in which either the temperature or humidity is converted into a digital code representing a frequency ratio between two oscillators. This ratio is determined by the ratios of the timing capacitances and bias currents in both oscillators. The reference oscillator is biased by a current whose temperature dependency is complementary to the proportional to absolute temperature (PTAT) current. For the temperature measurement, this results in an exceptional normalized sensitivity of about 0.77%/°C at the accepted expense of reduced linearity. The humidity sensor is a capacitor, whose value varies linearly with relative humidity (RH) with a normalized sensitivity of 0.055%/% RH. For comparison, two versions of the humidity sensor with an area of either 0.2 mm2 or 1.2 mm2 were fabricated in a commercial 0.18 μm CMOS process. The on-chip readout electronics operate from a 5 V power supply and consume a current of approximately 85 µA.

Fiber optic micro sensor for the measurement of tendon forces

PubMed Central

2012-01-01

A fiber optic sensor developed for the measurement of tendon forces was designed, numerically modeled, fabricated, and experimentally evaluated. The sensor incorporated fiber Bragg gratings and micro-fabricated stainless steel housings. A fiber Bragg grating is an optical device that is spectrally sensitive to axial strain. Stainless steel housings were designed to convert radial forces applied to the housing into axial forces that could be sensed by the fiber Bragg grating. The metal housings were fabricated by several methods including laser micromachining, swaging, and hydroforming. Designs are presented that allow for simultaneous temperature and force measurements as well as for simultaneous resolution of multi-axis forces. The sensor was experimentally evaluated by hydrostatic loading and in vitro testing. A commercial hydraulic burst tester was used to provide uniform pressures on the sensor in order to establish the linearity, repeatability, and accuracy characteristics of the sensor. The in vitro experiments were performed in excised tendon and in a dynamic gait simulator to simulate biological conditions. In both experimental conditions, the sensor was found to be a sensitive and reliable method for acquiring minimally invasive measurements of soft tissue forces. Our results suggest that this sensor will prove useful in a variety of biomechanical measurements. PMID:23033868

Self-Test Procedures for Gas Sensors Embedded in Microreactor Systems.

PubMed

Helwig, Andreas; Hackner, Angelika; Müller, Gerhard; Zappa, Dario; Sberveglieri, Giorgio

2018-02-03

Metal oxide (MOX) gas sensors sensitively respond to a wide variety of combustible, explosive and poisonous gases. However, due to the lack of a built-in self-test capability, MOX gas sensors have not yet been able to penetrate safety-critical applications. In the present work we report on gas sensing experiments performed on MOX gas sensors embedded in ceramic micro-reaction chambers. With the help of an external micro-pump, such systems can be operated in a periodic manner alternating between flow and no-flow conditions, thus allowing repetitive measurements of the sensor resistances under clean air, R 0 , and under gas exposure, R g a s , to be obtained, even under field conditions. With these pairs of resistance values, eventual drifts in the sensor baseline resistance can be detected and drift-corrected values of the relative resistance response R e s p = ( R 0 - R g a s ) / R 0 can be determined. Residual poisoning-induced changes in the relative resistance response can be detected by reference to humidity measurements taken with room-temperature-operated capacitive humidity sensors which are insensitive to the poisoning processes operative on heated MOX gas sensors.

Slot Antenna Integrated Re-Entrant Resonator Based Wireless Pressure Sensor for High-Temperature Applications.

PubMed

Su, Shujing; Lu, Fei; Wu, Guozhu; Wu, Dezhi; Tan, Qiulin; Dong, Helei; Xiong, Jijun

2017-08-25

The highly sensitive pressure sensor presented in this paper aims at wireless passive sensing in a high temperature environment by using microwave backscattering technology. The structure of the re-entrant resonator was analyzed and optimized using theoretical calculation, software simulation, and its equivalent lump circuit model was first modified by us. Micro-machining and high-temperature co-fired ceramic (HTCC) process technologies were applied to fabricate the sensor, solving the common problem of cavity sealing during the air pressure loading test. In addition, to prevent the response signal from being immersed in the strong background clutter of the hermetic metal chamber, which makes its detection difficult, we proposed two key techniques to improve the signal to noise ratio: the suppression of strong background clutter and the detection of the weak backscattered signal of the sensor. The pressure sensor demonstrated in this paper works well for gas pressure loading between 40 and 120 kPa in a temperature range of 24 °C to 800 °C. The experimental results show that the sensor resonant frequency lies at 2.1065 GHz, with a maximum pressure sensitivity of 73.125 kHz/kPa.

Microelectromechanical Systems; A DoD Dual Use Technology Industrial Assessment.

DTIC Science & Technology

1995-12-01

systems, • embedded sensors and actuators for condition-based maintenance of machines and vehicles, on-demand amplified structural strength in...will transmit temperature, pressure, and number-of- rotations information to a hand-held receiver used by the maintenance and service personnel. This...automobile industry being the major driver for most micro- machined sensors (pressure, acceleration and oxygen). In 1994 model year Projected Growth

NASA Tech Briefs, July 2009

NASA Technical Reports Server (NTRS)

2009-01-01

Topics covered include: Dual Cryogenic Capacitive Density Sensor; Hail Monitor Sensor; Miniature Six-Axis Load Sensor for Robotic Fingertip; Improved Blackbody Temperature Sensors for a Vacuum Furnace; Wrap-Around Out-the-Window Sensor Fusion System; Wide-Range Temperature Sensors with High-Level Pulse Train Output; Terminal Descent Sensor Simulation; A Robust Mechanical Sensing System for Unmanned Sea Surface Vehicles; Additive for Low-Temperature Operation of Li-(CF)n Cells; Li/CFx Cells Optimized for Low-Temperature Operation; Number Codes Readable by Magnetic-Field-Response Recorders; Determining Locations by Use of Networks of Passive Beacons; Superconducting Hot-Electron Submillimeter-Wave Detector; Large-Aperture Membrane Active Phased-Array Antennas; Optical Injection Locking of a VCSEL in an OEO; Measuring Multiple Resistances Using Single-Point Excitation; Improved-Bandwidth Transimpedance Amplifier; Inter-Symbol Guard Time for Synchronizing Optical PPM; Novel Materials Containing Single-Wall Carbon Nanotubes Wrapped in Polymer Molecules; Light-Curing Adhesive Repair Tapes; Thin-Film Solid Oxide Fuel Cells; Zinc Alloys for the Fabrication of Semiconductor Devices; Small, Lightweight, Collapsible Glove Box; Radial Halbach Magnetic Bearings; Aerial Deployment and Inflation System for Mars Helium Balloons; Steel Primer Chamber Assemblies for Dual Initiated Pyrovalves; Voice Coil Percussive Mechanism Concept for Hammer Drill; Inherently Ducted Propfans and Bi-Props; Silicon Nanowire Growth at Chosen Positions and Orientations; Detecting Airborne Mercury by Use of Gold Nanowires; Detecting Airborne Mercury by Use of Palladium Chloride; Micro Electron MicroProbe and Sample Analyzer; Nanowire Electron Scattering Spectroscopy; Electron-Spin Filters Would Offer Spin Polarization Greater than 1; Subcritical-Water Extraction of Organics from Solid Matrices; A Model for Predicting Thermoelectric Properties of Bi2Te3; Integrated Miniature Arrays of Optical Biomolecule Detectors; A Software Rejuvenation Framework for Distributed Computing; Kurtosis Approach to Solution of a Nonlinear ICA Problem; Robust Software Architecture for Robots; R4SA for Controlling Robots; Bio-Inspired Neural Model for Learning Dynamic Models; Evolutionary Computing Methods for Spectral Retrieval; Monitoring Disasters by Use of Instrumented Robotic Aircraft; Complexity for Survival of Living Systems; Using Drained Spacecraft Propellant Tanks for Habitation; Connecting Node; and Electrolytes for Low-Temperature Operation of Li-CFx Cells.

Temperature characteristics research of SOI pressure sensor based on asymmetric base region transistor

NASA Astrophysics Data System (ADS)

Zhao, Xiaofeng; Li, Dandan; Yu, Yang; Wen, Dianzhong

2017-07-01

Based on the asymmetric base region transistor, a pressure sensor with temperature compensation circuit is proposed in this paper. The pressure sensitive structure of the proposed sensor is constructed by a C-type silicon cup and a Wheatstone bridge with four piezoresistors ({R}1, {R}2, {R}3 and {R}4) locating on the edge of a square silicon membrane. The chip was designed and fabricated on a silicon on insulator (SOI) wafer by micro electromechanical system (MEMS) technology and bipolar transistor process. When the supply voltage is 5.0 V, the corresponding temperature coefficient of the sensitivity (TCS) for the sensor before and after temperature compensation are -1862 and -1067 ppm/°C, respectively. Through varying the ratio of the base region resistances {r}1 and {r}2, the TCS for the sensor with the compensation circuit is -127 ppm/°C. It is possible to use this compensation circuit to improve the temperature characteristics of the pressure sensor. Project supported by the National Natural Science Foundation of China (No. 61471159), the Natural Science Foundation of Heilongjiang Province (No. F201433), the University Nursing Program for Young Scholars with Creative Talents in Heilongjiang Province (No. 2015018), and the Special Funds for Science and Technology Innovation Talents of Harbin in China (No. 2016RAXXJ016).

MEMS fiber-optic Fabry-Perot pressure sensor for high temperature application

NASA Astrophysics Data System (ADS)

Fang, G. C.; Jia, P. G.; Cao, Q.; Xiong, J. J.

2016-10-01

We design and demonstrate a fiber-optic Fabry-Perot pressure sensor (FOFPPS) for high-temperature sensing by employing micro-electro-mechanical system (MEMS) technology. The FOFPPS is fabricated by anodically bonding the silicon wafer and the Pyrex glass together and fixing the facet of the optical fiber in parallel with the silicon surface by glass frit and organic adhesive. The silicon wafer can be reduced through dry etching technology to construct the sensitive diaphragm. The length of the cavity changes with the deformation of the diaphragm due to the loaded pressure, which leads to a wavelength shift of the interference spectrum. The pressure can be gauged by measuring the wavelength shift. The pressure experimental results show that the sensor has linear pressure sensitivities ranging from 0 kPa to 600 kPa at temperature range between 20°C to 300°C. The pressure sensitivity at 300°C is approximately 27.63 pm/kPa. The pressure sensitivities gradually decrease with increasing the temperature. The sensor also has a linear thermal drift when temperature changes from 20°C - 300°C.

An Integrated Thermal Compensation System for MEMS Inertial Sensors

PubMed Central

Chiu, Sheng-Ren; Teng, Li-Tao; Chao, Jen-Wei; Sue, Chung-Yang; Lin, Chih-Hsiou; Chen, Hong-Ren; Su, Yan-Kuin

2014-01-01

An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 μm 1P5M standard CMOS process, is designed and integrated with the gyroscope by directly wire bonding. Then, since the temperature effect is one of the critical issues in the high performance gyroscope applications, the temperature-dependent characteristics of the micro-gyroscope are discussed. Furthermore, to compensate the TBD of the micro-gyroscope, a thermal compensation system is proposed and integrated in the aforementioned ASIC to actively tune the parameters in the digital trimming mechanism, which is designed in the readout ASIC. Finally, some experimental results demonstrate that the TBD of the micro-gyroscope can be compensated effectively by the proposed compensation system. PMID:24599191

Temperature and pressure fiber-optic sensors applied to minimally invasive diagnostics and therapies

NASA Astrophysics Data System (ADS)

Hamel, Caroline; Pinet, Éric

2006-02-01

We present how fiber-optic temperature or pressure sensors could be applied to minimally invasive diagnostics and therapies. For instance a miniature pressure sensor based on micro-optical mechanical systems (MOMS) could solve most of the problems associated with fluidic pressure transduction presently used for triggering purposes. These include intra-aortic balloon pumping (IABP) therapy and other applications requiring detection of fast and/or subtle fluid pressure variations such as for intracranial pressure monitoring or for urology diagnostics. As well, miniature temperature sensors permit minimally invasive direct temperature measurement in diagnostics or therapies requiring energy transfer to living tissues. The extremely small size of fiber-optic sensors that we have developed allows quick and precise in situ measurements exactly where the physical parameters need to be known. Furthermore, their intrinsic immunity to electromagnetic interference (EMI) allows for the safe use of EMI-generating therapeutic or diagnostic equipments without compromising the signal quality. With the trend of ambulatory health care and the increasing EMI noise found in modern hospitals, the use of multi-parameter fiber-optic sensors will improve constant patient monitoring without any concern about the effects of EMI disturbances. The advantages of miniature fiberoptic sensors will offer clinicians new monitoring tools that open the way for improved diagnostic accuracy and new therapeutic technologies.

Fiber-integrated refractive index sensor based on a diced Fabry-Perot micro-resonator.

PubMed

Suntsov, Sergiy; Rüter, Christian E; Schipkowski, Tom; Kip, Detlef

2017-11-20

We report on a fiber-integrated refractive index sensor based on a Fabry-Perot micro-resonator fabricated using simple diamond blade dicing of a single-mode step-index fiber. The performance of the device has been tested for the refractive index measurements of sucrose solutions as well as in air. The device shows a sensitivity of 1160 nm/RIU (refractive index unit) at a wavelength of 1.55 μm and a temperature cross-sensitivity of less than 10 -7   RIU/°C. Based on evaluation of the broadband reflection spectra, refractive index steps of 10 -5 of the solutions were accurately measured. The conducted coating of the resonator sidewalls with layers of a high-index material with real-time reflection spectrum monitoring could help to significantly improve the sensor performance.

Flexible micro flow sensor for micro aerial vehicles

NASA Astrophysics Data System (ADS)

Zhu, Rong; Que, Ruiyi; Liu, Peng

2017-12-01

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.

CO Sensing Performance of a Micro Thermoelectric Gas Sensor with AuPtPd/SnO2 Catalyst and Effects of a Double Catalyst Structure with Pt/α-Al2O3

PubMed Central

Goto, Tomoyo; Itoh, Toshio; Akamatsu, Takafumi; Shin, Woosuck

2015-01-01

The CO sensing properties of a micro thermoelectric gas sensor (micro-TGS) with a double AuPtPd/SnO2 and Pt/α-Al2O3 catalyst were investigated. While several nanometer sized Pt and Pd particles were uniformly dispersed on SnO2, the Au particles were aggregated as particles measuring >10 nm in diameter. In situ diffuse reflectance Fourier transform Infrared spectroscopy (DRIFT) analysis of the catalyst showed a CO adsorption peak on Pt and Pd, but no clear peak corresponding to the interaction between CO and Au was detected. Up to 200 °C, CO combustion was more temperature dependent than that of H2, while H2 combustion was activated by repeated exposure to H2 gas during the periodic gas test. Selective CO sensing of the micro-TGS against H2 was attempted using a double catalyst structure with 0.3–30 wt% Pt/α-Al2O3 as a counterpart combustion catalyst. The sensor output of the micro-TGS decreased with increasing Pt content in the Pt/α-Al2O3 catalyst, by cancelling out the combustion heat from the AuPtPd/SnO2 catalyst. In addition, the AuPtPd/SnO2 and 0.3 wt% Pt/α-Al2O3 double catalyst sensor showed good and selective CO detection. We therefore demonstrated that our micro-TGS with double catalyst structure is useful for controlling the gas selectivity of CO against H2. PMID:26694397

Measurement method of magnetic field for the wire suspended micro-pendulum accelerometer.

PubMed

Lu, Yongle; Li, Leilei; Hu, Ning; Pan, Yingjun; Ren, Chunhua

2015-04-13

Force producer is one of the core components of a Wire Suspended Micro-Pendulum Accelerometer; and the stability of permanent magnet in the force producer determines the consistency of the acceleration sensor's scale factor. For an assembled accelerometer; direct measurement of magnetic field strength is not a feasible option; as the magnetometer probe cannot be laid inside the micro-space of the sensor. This paper proposed an indirect measurement method of the remnant magnetization of Micro-Pendulum Accelerometer. The measurement is based on the working principle of the accelerometer; using the current output at several different scenarios to resolve the remnant magnetization of the permanent magnet. Iterative Least Squares algorithm was used for the adjustment of the data due to nonlinearity of this problem. The calculated remnant magnetization was 1.035 T. Compared to the true value; the error was less than 0.001 T. The proposed method provides an effective theoretical guidance for measuring the magnetic field of the Wire Suspended Micro-Pendulum Accelerometer; correcting the scale factor and temperature influence coefficients; etc.

From Extended Nanofluidics to an Autonomous Solar-Light-Driven Micro Fuel-Cell Device.

PubMed

Pihosh, Yuriy; Uemura, Jin; Turkevych, Ivan; Mawatari, Kazuma; Kazoe, Yutaka; Smirnova, Adelina; Kitamori, Takehiko

2017-07-03

Autonomous micro/nano mechanical, chemical, and biomedical sensors require persistent power sources scaled to their size. Realization of autonomous micro-power sources is a challenging task, as it requires combination of wireless energy supply, conversion, storage, and delivery to the sensor. Herein, we realized a solar-light-driven power source that consists of a micro fuel cell (μFC) and a photocatalytic micro fuel generator (μFG) integrated on a single microfluidic chip. The μFG produces hydrogen by photocatalytic water splitting under solar light. The hydrogen fuel is then consumed by the μFC to generate electricity. Importantly, the by-product water returns back to the photocatalytic μFG via recirculation loop without losses. Both devices rely on novel phenomena in extended-nano-fluidic channels that ensure ultra-fast proton transport. As a proof of concept, we demonstrate that μFG/μFC source achieves remarkable energy density of ca. 17.2 mWh cm -2 at room temperature. © 2017 Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim.

Calorimetric gas sensor

DOEpatents

Ricco, A.J.; Hughes, R.C.; Smith, J.H.; Moreno, D.J.; Manginell, R.P.; Senturia, S.D.; Huber, R.J.

1998-11-10

A combustible gas sensor is described that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 {micro}m thick {times} 10{micro}m wide {times} 100, 250, 500, or 1000 {micro}m-long polycrystalline Si; some are overcoated with a 0.25 {micro}m-thick protective CVD Si{sub 3}N{sub 4} layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac){sub 2} onto microfilaments resistively heated to approximately 500 C; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300 C (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H{sub 2} concentrations between 100 ppm and 1% in an 80/20 N{sub 2}/O{sub 2} mixture. Other catalytic materials can also be used. 11 figs.

Shape control of Co3O4 micro-structures for high-performance gas sensor

NASA Astrophysics Data System (ADS)

Zhou, Qu; Zeng, Wen

2018-01-01

Recently, spinel cobalt oxide (Co3O4) structure has been widely investigated due to its excellent sensitivity towards various noxious gases and good response/recovery speed at low concentration. In this work, we designed and synthesized two kinds of different Co3O4 micro-structure (cube and octahedron) with a similar size. After fabricating them into gas sensors, we found that the crystal plane structure of Co3O4 has an important effect on its gas sensing performance. Furthermore, the {111} planes of Co3O4may be more sensitive than {100} planes to various testing gases. Co3O4 octahedrons micro-structure exhibits an excellent sensitivity (about 12.6), good response/recovery speed and cycling stability (no decline even after 2 days) under 50 ppm ethanol gases at working temperature of 200 °C. As such, thisCo3O4 octahedrons micro-structure is a promising candidate for a high-performance gas sensing material.

Piezoelectric Active Humidity Sensors Based on Lead-Free NaNbO₃ Piezoelectric Nanofibers.

PubMed

Gu, Li; Zhou, Di; Cao, Jun Cheng

2016-06-07

The development of micro-/nano-scaled energy harvesters and the self-powered sensor system has attracted great attention due to the miniaturization and integration of the micro-device. In this work, lead-free NaNbO₃ piezoelectric nanofibers with a monoclinic perovskite structure were synthesized by the far-field electrospinning method. The flexible active humidity sensors were fabricated by transferring the nanofibers from silicon to a soft polymer substrate. The sensors exhibited outstanding piezoelectric energy-harvesting performance with output voltage up to 2 V during the vibration process. The output voltage generated by the NaNbO₃ sensors exhibited a negative correlation with the environmental humidity varying from 5% to 80%, where the peak-to-peak value of the output voltage generated by the sensors decreased from 0.40 to 0.07 V. The sensor also exhibited a short response time, good selectively against ethanol steam, and great temperature stability. The piezoelectric active humidity sensing property could be attributed to the increased leakage current in the NaNbO₃ nanofibers, which was generated due to proton hopping among the H₃O⁺ groups in the absorbed H₂O layers under the driving force of the piezoelectric potential.

Computational fluid dynamic (CFD) investigation of thermal uniformity in a thermal cycling based calibration chamber for MEMS

NASA Astrophysics Data System (ADS)

Gui, Xulong; Luo, Xiaobing; Wang, Xiaoping; Liu, Sheng

2015-12-01

Micro-electrical-mechanical system (MEMS) has become important for many industries such as automotive, home appliance, portable electronics, especially with the emergence of Internet of Things. Volume testing with temperature compensation has been essential in order to provide MEMS based sensors with repeatability, consistency, reliability, and durability, but low cost. Particularly, in the temperature calibration test, temperature uniformity of thermal cycling based calibration chamber becomes more important for obtaining precision sensors, as each sensor is different before the calibration. When sensor samples are loaded into the chamber, we usually open the door of the chamber, then place fixtures into chamber and mount the samples on the fixtures. These operations may affect temperature uniformity in the chamber. In order to study the influencing factors of sample-loading on the temperature uniformity in the chamber during calibration testing, numerical simulation work was conducted first. Temperature field and flow field were simulated in empty chamber, chamber with open door, chamber with samples, and chamber with fixtures, respectively. By simulation, it was found that opening chamber door, sample size and number of fixture layers all have effects on flow field and temperature field. By experimental validation, it was found that the measured temperature value was consistent with the simulated temperature value.

Third-generation imaging sensor system concepts

NASA Astrophysics Data System (ADS)

Reago, Donald A.; Horn, Stuart B.; Campbell, James, Jr.; Vollmerhausen, Richard H.

1999-07-01

Second generation forward looking infrared sensors, based on either parallel scanning, long wave (8 - 12 um) time delay and integration HgCdTe detectors or mid wave (3 - 5 um), medium format staring (640 X 480 pixels) InSb detectors, are being fielded. The science and technology community is now turning its attention toward the definition of a future third generation of FLIR sensors, based on emerging research and development efforts. Modeled third generation sensor performance demonstrates a significant improvement in performance over second generation, resulting in enhanced lethality and survivability on the future battlefield. In this paper we present the current thinking on what third generation sensors systems will be and the resulting requirements for third generation focal plane array detectors. Three classes of sensors have been identified. The high performance sensor will contain a megapixel or larger array with at least two colors. Higher operating temperatures will also be the goal here so that power and weight can be reduced. A high performance uncooled sensor is also envisioned that will perform somewhere between first and second generation cooled detectors, but at significantly lower cost, weight, and power. The final third generation sensor is a very low cost micro sensor. This sensor can open up a whole new IR market because of its small size, weight, and cost. Future unattended throwaway sensors, micro UAVs, and helmet mounted IR cameras will be the result of this new class.

Analysis of continuous multi-seasonal in-situ subsurface temperature measurements on Mars

NASA Astrophysics Data System (ADS)

Paton, M. D.; Harri, A.-M.; Mäkinen, T.; Savijärvi, H.; Kemppinen, O.; Hagermann, A.

2015-10-01

Our investigations reveal the local thermal properties on the Martian surface at the Viking Lander 1 (VL-1) site. We achieved this by using the VL-1 footpad temperature sensor which was buried, and due to its location, was under shadow for extensive periods of time during each sol. Reconstruction of the surface and subsurface temperature history of the regolith in the vicinity of the temperature sensor was made using a 1-D atmospheric column model (UH-FMI) together with a thermal model of the lander. The results have implications for the interpretation of subsurface thermal measurements made close to a spacecraft or rock, interpretation of remote sensing measurements of thermal inertia and understanding the micro-scale behavior of the Martian atmosphere.

A temperature characteristic research and compensation design for micro-machined gyroscope

NASA Astrophysics Data System (ADS)

Fu, Qiang; di, Xin-Peng; Chen, Wei-Ping; Yin, Liang; Liu, Xiao-Wei

2017-02-01

The all temperature range stability is the most important technology of MEMS angular velocity sensor according to the principle of capacity detecting. The correlation between driven force and zero-point of sensor is summarized according to the temperature characteristic of the air-damping and resonant frequency of sensor header. A constant trans-conductance high-linearity amplifier is designed to realize the low phase-drift and low amplitude-drift interface circuit at all-temperature range. The chip is fabricated in a standard 0.5 μm CMOS process. Compensation achieved by driven force to zero-point drift caused by the stiffness of physical construction and air-damping is adopted. Moreover, the driven force can be obtained from the drive-circuit to avoid the complex sampling. The test result shows that the zero-point drift is lower than 30∘/h (1-sigma) at the temperature range from -40∘C to 60∘C after three-order compensation made by driven force.

A micro dew point sensor with a thermal detection principle

NASA Astrophysics Data System (ADS)

Kunze, M.; Merz, J.; Hummel, W.-J.; Glosch, H.; Messner, S.; Zengerle, R.

2012-01-01

We present a dew point temperature sensor with the thermal detection of condensed water on a thin membrane, fabricated by silicon micromachining. The membrane (600 × 600 × ~1 µm3) is part of a silicon chip and contains a heating element as well as a thermopile for temperature measurement. By dynamically heating the membrane and simultaneously analyzing the transient increase of its temperature it is detected whether condensed water is on the membrane or not. To cool the membrane down, a peltier cooler is used and electronically controlled in a way that the temperature of the membrane is constantly held at a value where condensation of water begins. This temperature is measured and output as dew point temperature. The sensor system works in a wide range of dew point temperatures between 1 K and down to 44 K below air temperature. In experimental investigations it could be proven that the deviation of the measured dew point temperatures compared to reference values is below ±0.2 K in an air temperature range of 22 to 70 °C. At low dew point temperatures of -20 °C (air temperature = 22 °C) the deviation increases to nearly -1 K.

Micro-Hall devices for magnetic, electric and photo-detection

NASA Astrophysics Data System (ADS)

Gilbertson, A.; Sadeghi, H.; Panchal, V.; Kazakova, O.; Lambert, C. J.; Solin, S. A.; Cohen, L. F.

Multifunctional mesoscopic sensors capable of detecting local magnetic (B) , electric (E) , and optical fields can greatly facilitate image capture in nano-arrays that address a multitude of disciplines. The use of micro-Hall devices as B-field sensors and, more recently as E-field sensors is well established. Here we report the real-space voltage response of InSb/AlInSb micro-Hall devices to not only local E-, and B-fields but also to photo-excitation using scanning probe microscopy. We show that the ultrafast generation of localised photocarriers results in conductance perturbations analogous to those produced by local E-fields. Our experimental results are in good agreement with tight-binding transport calculations in the diffusive regime. At room temperature, samples exhibit a magnetic sensitivity of >500 nT/ √Hz, an optical noise equivalent power of >20 pW/ √Hz (λ = 635 nm) comparable to commercial photoconductive detectors, and charge sensitivity of >0.04 e/ √Hz comparable to that of single electron transistors. Work done while on sabbatical from Washington University. Co-founder of PixelEXX, a start-up whose focus is imaging nano-arrays.

Going Places No Infrared Temperature Devices Have Gone Before

NASA Technical Reports Server (NTRS)

2003-01-01

Exergen's IRt/c is a self-powered sensor that matches a thermocouple within specified temperature ranges and provides a predictable and repeatable signal outside of this specified range. Possessing an extremely fast time constant, the infrared technology allows users to measure product temperature without touching the product. The IRt/c uses a device called a thermopile to measure temperature and generate current. Traditionally, these devices are not available in a size that would be compatible with the Exergen IRt/c, based on NASA s quarterinch specifications. After going through five circuit designs to find a thermopile that would suit the IRt/c design and match the signal needed for output, Exergen maintains that it developed a model that totaled just 20 percent of the volume of the previous smallest detector in the world. Following completion of the project with Glenn, Exergen continued development of the IRt/c for other customers, spinning off a new product line called the micro IRt/c. This latest development has broadened applications for industries that previously could not use infrared thermometers due to size constraints. The first commercial use of the micro IRt/c involved an original equipment manufacturer that makes laminating machinery consisting of heated rollers in very tight spots. Accurate temperature measurement for this application requires close proximity to the heated rollers. With the micro IRt/c s 50-millisecond time constant, the manufacturer is able to gain closer access to the intended temperature targets for exact readings, thereby increasing productivity and staying ahead of competition.In a separate application, the infrared temperature sensor is being utilized for avalanche warnings in Switzerland. The IRt/c is mounted about 5 meters above the ground to measure the snow cover throughout the mountainous regions of the country.

Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors

DOEpatents

Thundat, Thomas G.; Oden, Patrick I.; Datskos, Panagiotis G.

2000-01-01

A non-contact infrared thermometer measures target temperatures remotely without requiring the ratio of the target size to the target distance to the thermometer. A collection means collects and focusses target IR radiation on an IR detector. The detector measures thermal energy of the target over a spectrum using micromechanical sensors. A processor means calculates the collected thermal energy in at least two different spectral regions using a first algorithm in program form and further calculates the ratio of the thermal energy in the at least two different spectral regions to obtain the target temperature independent of the target size, distance to the target and emissivity using a second algorithm in program form.

High Temperature - Thin Film Strain Gages Based on Alloys of Indium Tin Oxide

NASA Technical Reports Server (NTRS)

Gregory, Otto J.; Cooke, James D.; Bienkiewicz, Joseph M.

1998-01-01

A stable, high temperature strain gage based on reactively sputtered indium tin oxide (ITO) was demonstrated at temperatures up to 1050 C. These strain sensors exhibited relatively large, negative gage factors at room temperature and their piezoresistive response was both linear and reproducible when strained up to 700 micro-in/in. When cycled between compression and tension, these sensors also showed very little hysteresis, indicating excellent mechanical stability. Thin film strain gages based on selected ITO alloys withstood more than 50,000 strain cycles of +/- 500 micro-in/in during 180 hours of testing in air at 1000 C, with minimal drift at temperature. Drift rates as low as 0.0009%/hr at 1000 C were observed for ITO films that were annealed in nitrogen at 700 C prior to strain testing. These results compare favorably with state of the art 10 micro-m thick PdCr films deposited by NASA, where drift rates of 0.047%/hr at 1050 C were observed. Nitrogen annealing not only produced the lowest drift rates to date, but also produce the largest dynamic gage factors (G = 23.5). These wide bandgap, semiconductor strain sensors also exhibited moderately low temperature coefficients of resistance (TCR) at temperatures up to 1100 C, when tested in a nitrogen ambient. A TCR of +230 ppm/C over the temperature range 200 C < T < 500 C and a TCR of -469 ppm/C over the temperature range 600 C < T < 1100 C was observed for the films tested in nitrogen. However, the resistivity behavior changed considerably when the same films were tested in oxygen ambients. A TCR of -1560 ppm/C was obtained over the temperature range of 200 C < T < 1100 C. When similar films were protected with an overcoat or when ITO films were prepared with higher oxygen contents in the plasma, two distinct TCR's were observed. At T < 800 C, a linear TCR of -210 ppm/C was observed and at T > 800 C, a linear TCR of -2170 DDm/C was observed. The combination of a moderately low TCR and a relatively large gage factor make these semiconducting oxide films promising candidates for the active strain elements in high temperature thin film strain gages, particularly in applications where static strain measurement is desired.

Design and Experimentation with Sandwich Microstructure for Catalytic Combustion-Type Gas Sensors

PubMed Central

Gu, Jun-Tao; Zhang, Yong-De; Jiang, Jin-Gang

2014-01-01

The traditional handmade catalytic combustion gas sensor has some problems such as a pairing difficulty, poor consistency, high power consumption, and not being interchangeable. To address these issues, integrated double catalytic combustion of alcohol gas sensor was designed and manufactured using silicon micro-electro-mechanical systems (MEMS) technology. The temperature field of the sensor is analyzed using the ANSYS finite element analysis method. In this work, the silicon oxide-PECVD-oxidation technique is used to manufacture a SiO2-Si3N2-SiO2 microstructure carrier with a sandwich structure, while wet etching silicon is used to form a beam structure to reduce the heat consumption. Thin-film technology is adopted to manufacture the platinum-film sensitive resistance. Nano Al2O3-ZrO-ThO is coated to format the sensor carrier, and the sensitive unit is dipped in a Pt-Pd catalyst solution to form the catalytic sensitive bridge arm. Meanwhile the uncoated catalyst carrier is considered as the reference unit, realizing an integrated chip based on a micro double bridge and forming sensors. The lines of the Pt thin-film resistance have been observed with an electronic microscope. The compensation of the sensitive material carriers and compensation materials have been analyzed using an energy spectrum. The results show that the alcohol sensor can detect a volume fraction between 0 and 4,500 × 10−6 and has good linear output characteristic. The temperature ranges from −20 to +40 °C. The humidity ranges from 30% to 85% RH. The zero output of the sensor is less than ±2.0% FS. The power consumption is ≤0.2 W, and both the response and recovery time are approximately 20 s. PMID:24625742

Fast response of carbon monoxide gas sensors using a highly porous network of ZnO nanoparticles decorated on 3D reduced graphene oxide

NASA Astrophysics Data System (ADS)

Ha, Nguyen Hai; Thinh, Dao Duc; Huong, Nguyen Thanh; Phuong, Nguyen Huy; Thach, Phan Duy; Hong, Hoang Si

2018-03-01

Zinc oxide (ZnO) nanoparticles loaded onto 3D reduced graphene oxide (3D-RGO) for carbon monoxide (CO) sensing were synthesized using hydrothermal method. The highly porous ZnO/3D-RGO configuration was stable without collapsing and was deposited on the micro-heater of the CO gas sensor. The resulting CO gas sensor displayed high sensitivity, fast response/recovery, and good linearity. The sensor achieved a response value of 85.2% for 1000 ppm CO at a working temperature of 200 °C. The response and recovery times of the sensor were 7 and 9 s for 1000 ppm CO at 200 °C. Similarly, the response value, response time, and recovery time of the sensor at room temperature were 27.5%, 14 s, and 15 s, respectively. The sensor demonstrated a distinct response to various CO concentrations in the range of 1-1000 ppm and good selectivity toward CO gas. In addition, the sensor exhibited good repeatability in multi-cycle and long-term stability.

A Two-Dimensional Flow Sensor with Integrated Micro Thermal Sensing Elements and a Back Propagation Neural Network

PubMed Central

Que, Ruiyi; Zhu, Rong

2014-01-01

This paper demonstrates a novel flow sensor with two-dimensional 360° direction sensitivity achieved with a simple structure and a novel data fusion algorithm. Four sensing elements with roundabout wires distributed in four quadrants of a circle compose the sensor probe, and work in constant temperature difference (CTD) mode as both Joule heaters and temperature detectors. The magnitude and direction of a fluid flow are measured by detecting flow-induced temperature differences among the four elements. The probe is made of Ti/Au thin-film with a diameter of 2 mm, and is fabricated using micromachining techniques. When a flow goes through the sensor, the flow-induced temperature differences are detected by the sensing elements that also serve as the heaters of the sensor. By measuring the temperature differences among the four sensing elements symmetrically distributed in the sensing area, a full 360° direction sensitivity can be obtained. By using a BP neural network to model the relationship between the readouts of the four sensor elements and flow parameters and execute data fusion, the magnitude and direction of the flow can be deduced. Validity of the sensor design was proven through both simulations and experiments. Wind tunnel experimental results show that the measurement accuracy of the airflow speed reaches 0.72 m/s in the range of 3 m/s–30 m/s and the measurement accuracy of flow direction angle reaches 1.9° in the range of 360°. PMID:24385032

A two-dimensional flow sensor with integrated micro thermal sensing elements and a back propagation neural network.

PubMed

Que, Ruiyi; Zhu, Rong

2013-12-31

This paper demonstrates a novel flow sensor with two-dimensional 360° direction sensitivity achieved with a simple structure and a novel data fusion algorithm. Four sensing elements with roundabout wires distributed in four quadrants of a circle compose the sensor probe, and work in constant temperature difference (CTD) mode as both Joule heaters and temperature detectors. The magnitude and direction of a fluid flow are measured by detecting flow-induced temperature differences among the four elements. The probe is made of Ti/Au thin-film with a diameter of 2 mm, and is fabricated using micromachining techniques. When a flow goes through the sensor, the flow-induced temperature differences are detected by the sensing elements that also serve as the heaters of the sensor. By measuring the temperature differences among the four sensing elements symmetrically distributed in the sensing area, a full 360° direction sensitivity can be obtained. By using a BP neural network to model the relationship between the readouts of the four sensor elements and flow parameters and execute data fusion, the magnitude and direction of the flow can be deduced. Validity of the sensor design was proven through both simulations and experiments. Wind tunnel experimental results show that the measurement accuracy of the airflow speed reaches 0.72 m/s in the range of 3 m/s-30 m/s and the measurement accuracy of flow direction angle reaches 1.9° in the range of 360°.

Fabrication and Testing of a Thin-Film Heat Flux Sensor for a Stirling Convertor

NASA Technical Reports Server (NTRS)

Wilson, Scott D.; Fralick, Gus c.; Wrbanek, John D.; Sayir, Ali

2010-01-01

The NASA Glenn Research Center (GRC) has been testing high-efficiency free-piston Stirling convertors for potential use in radioisotope power systems since 1999. Stirling convertors are being operated for many years to demonstrate a radioisotope power system capable of providing reliable power for potential multiyear missions. Techniques used to monitor the convertors for change in performance include measurements of temperature, pressure, energy addition, and energy rejection. Micro-porous bulk insulation is used in the Stirling convertor test setup to minimize the loss of thermal energy from the electric heat source to the environment. The insulation is characterized before extended operation, enabling correlation of the net thermal energy addition to the convertor. Aging micro-porous bulk insulation changes insulation efficiency, introducing errors in the correlation for net thermal energy addition. A thin-film heat flux sensor was designed and fabricated to directly measure the net thermal energy addition to the Stirling convertor. The fabrication techniques include slipcasting and using Physical Vapor Deposition (PVD). One-micron-thick noble metal thermocouples measure temperature on the surface of an alumina ceramic disk and heat flux is calculated. Fabrication, integration, and test results of a thin-film heat flux sensor are presented.

Effect of Knudsen thermal force on the performance of low-pressure micro gas sensor

NASA Astrophysics Data System (ADS)

Barzegar Gerdroodbary, M.; Ganji, D. D.; Taeibi-Rahni, M.; Vakilipour, Shidvash

2017-07-01

In this paper, Direct Simulation Monte Carlo (DSMC) simulations were applied to investigate the mechanism of the force generation inside a low-pressure gas sensor. The flow feature and force generation mechanism inside a rectangular enclosure with heat and cold arms as the non-isothermal walls are comprehensively explained. In addition, extensive parametric studies are done to study the effects of physical parameters on the performance and characteristics of this device in different operating conditions. In this research, the Knudsen number is varied from 0.1 to 4.5 (0.5 to 11torr) to reveal all the characteristics of the thermally driven force inside the MEMS sensor. In order to simulate a rarefied gas inside the micro gas detector, Boltzmann equations are applied to obtain high-precision results. The effects of ambient pressure and temperature difference of arms are comprehensively investigated. Our findings show that maximum force increases more than 7 times when the temperature difference of the cold and hot arms is increased from 10 to 100K. In addition, the results demonstrate that the thermal gradient at rarefied pressure induces complex structure, and the mechanism of force generation highly varies at different pressure conditions.

MEMS (Micro-Electro-Mechanical Systems) for Automotive and Consumer Electronics

NASA Astrophysics Data System (ADS)

Marek, Jiri; Gómez, Udo-Martin

MEMS sensors gained over the last two decades an impressive width of applications: (a) ESP: A car is skidding and stabilizes itself without driver intervention (b) Free-fall detection: A laptop falls to the floor and protects the hard drive by parking the read/write drive head automatically before impact. (c) Airbag: An airbag fires before the driver/occupant involved in an impending automotive crash impacts the steering wheel, thereby significantly reducing physical injury risk. MEMS sensors are sensing the environmental conditions and are giving input to electronic control systems. These crucial MEMS sensors are making system reactions to human needs more intelligent, precise, and at much faster reaction rates than humanly possible. Important prerequisites for the success of sensors are their size, functionality, power consumption, and costs. This technical progress in sensor development is realized by micro-machining. The development of these processes was the breakthrough to industrial mass-production for micro-electro-mechanical systems (MEMS). Besides leading-edge micromechanical processes, innovative and robust ASIC designs, thorough simulations of the electrical and mechanical behaviour, a deep understanding of the interactions (mainly over temperature and lifetime) of the package and the mechanical structures are needed. This was achieved over the last 20 years by intense and successful development activities combined with the experience of volume production of billions of sensors. This chapter gives an overview of current MEMS technology, its applications and the market share. The MEMS processes are described, and the challenges of MEMS, compared to standard IC fabrication, are discussed. The evolution of MEMS requirements is presented, and a short survey of MEMS applications is shown. Concepts of newest inertial sensors for ESP-systems are given with an emphasis on the design concepts of the sensing element and the evaluation circuit for achieving excellent noise performance. The chapter concludes with an outlook on arising new MEMS applications such as energy harvester and micro fuel cells.

The Design and Optimization of a Highly Sensitive and Overload-Resistant Piezoresistive Pressure Sensor

PubMed Central

Meng, Xiawei; Zhao, Yulong

2016-01-01

A piezoresistive pressure sensor with a beam-membrane-dual-island structure is developed for micro-pressure monitoring in the field of aviation, which requires great sensitivity and overload resistance capacity. The design, fabrication, and test of the sensor are presented in this paper. By analyzing the stress distribution of sensitive elements using the finite element method, a novel structure incorporating sensitive beams with a traditional bossed diaphragm is built up. The proposed structure proved to be advantageous in terms of high sensitivity and high overload resistance compared with the conventional bossed diaphragm and flat diaphragm structures. Curve fittings of surface stress and deflection based on ANSYS simulation results are performed to establish the sensor equations. Fabricated on an n-type single crystal silicon wafer, the sensor chips are wire-bonded to a printed circuit board (PCB) and packaged for experiments. The static and dynamic characteristics are tested and discussed. Experimental results show that the sensor has a sensitivity as high as 17.339 μV/V/Pa in the range of 500 Pa at room temperature, and a high overload resistance of 200 times overpressure. Due to the excellent performance, the sensor can be applied in measuring micro-pressure lower than 500 Pa. PMID:27005627

Temperature Pill

NASA Technical Reports Server (NTRS)

1988-01-01

Ingestible Thermal Monitoring System was developed at Johns Hopkins University as means of getting internal temperature readings for treatments of such emergency conditions as dangerously low (hypothermia) and dangerously high (hyperthermia) body temperatures. ITMS's accuracy is off no more than one hundredth of a degree and provides the only means of obtaining deep body temperature. System has additional applicability in fertility monitoring and some aspects of surgery, critical care obstetrics, metabolic disease treatment, gerontology (aging) and food processing research. Three-quarter inch silicone capsule contains telemetry system, micro battery, and a quartz crystal temperature sensor inserted vaginally, rectally, or swallowed.

RFID reader with gas sensing capability for monitoring fruit along the logistic chain: array development and signal processing

NASA Astrophysics Data System (ADS)

Llobet, Eduard; Vergara, Alexander; Ramírez, José Luis; Zampolli, Stefano; Becker, Thomas; Fonseca, Luis

2007-05-01

The reliable and low-cost quantitative detection of ethylene for food/fruit applications remains an unsolved problem. Existing commercial systems are able to quantify ethylene (at sub ppm levels) but either they are off-line: require periodic sample collection and use of reagents or high-cost. We will report on the development of an RFID reader with onboard micro-machined metal oxide gas sensors aimed at monitoring climacteric fruit during transport and vending. The developed platform integrates a commercial off the shelf inductive coupling RF transceiver in the 13.56MHz band, fully compliant with the ISO15693 standard, micro-hotplate gas sensors, driving and readout electronics. If the sensors are operated at a fixed temperature, the reader could work as an alarm level monitor able to assess the conservation stage of apples. On the other hand, when the sensors are operated under an optimised temperature-modulation mode, accurate calibration models for the species that are relevant to assess the conservation stage of apples (i.e., ethylene, acetaldehyde and ethanol) can be built. Finally, different feature extraction techniques such as the FFT and the Energy Vector will be used in combination with pattern recognition tools like PLS and PLS-DA to show that our system is able to identify and quantify the species that are relevant for the application considered.

Micro-resonator-based electric field sensors with long durations of sensitivity

NASA Astrophysics Data System (ADS)

Ali, Amir R.

2017-05-01

In this paper, we present a new fabrication method for the whispering gallery mode (WGM) micro-sphere based electric field sensor that which allows for longer time periods of sensitivity. Recently, a WGM-based photonic electric field sensor was proposed using a coupled dielectric microsphere-beam. The external electric field imposes an electrtrostriction force on the dielectric beam, deflecting it. The beam, in turn compresses the sphere causing a shift in its WGM. As part of the fabrication process, the PDMS micro-beams and the spheres are curied at high-temperature (100oC) and subsequently poled by exposing to strong external electric field ( 8 MV/m) for two hours. The poling process allows for the deposition of surface charges thereby increasing the electrostriction effect. This methodology is called curing-then-poling (CTP). Although the sensors do become sufficiently sensitive to electric field, they start de-poling after a short period (within 10 minutes) after poling, hence losing sensitivity. In an attempt to mitigate this problem and to lock the polarization for a longer period, we use an alternate methodology whereby the beam is poled and cured simultaneously (curing-while-poling or CWP). The new fabrication method allows for the retention of polarization (and hence, sensitivity to electric field) longer ( 1500 minutes). An analysis is carried out along with preliminary experiments. Results show that electric fields as small as 100 V/m can be detected with a 300 μm diameter sphere sensor a day after poling.

Recent Developments of Magnetoresistive Sensors for Industrial Applications

PubMed Central

Jogschies, Lisa; Klaas, Daniel; Kruppe, Rahel; Rittinger, Johannes; Taptimthong, Piriya; Wienecke, Anja; Rissing, Lutz; Wurz, Marc Christopher

2015-01-01

The research and development in the field of magnetoresistive sensors has played an important role in the last few decades. Here, the authors give an introduction to the fundamentals of the anisotropic magnetoresistive (AMR) and the giant magnetoresistive (GMR) effect as well as an overview of various types of sensors in industrial applications. In addition, the authors present their recent work in this field, ranging from sensor systems fabricated on traditional substrate materials like silicon (Si), over new fabrication techniques for magnetoresistive sensors on flexible substrates for special applications, e.g., a flexible write head for component integrated data storage, micro-stamping of sensors on arbitrary surfaces or three dimensional sensing under extreme conditions (restricted mounting space in motor air gap, high temperatures during geothermal drilling). PMID:26569263

Micro flow-through PCR in a PMMA chip fabricated by KrF excimer laser.

PubMed

Yao, Liying; Liu, Baoan; Chen, Tao; Liu, Shibing; Zuo, Tiechuan

2005-09-01

As the third PCR technology, micro flow-through PCR chip can amplify DNA specifically in an exponential fashion in vitro. Nowadays many academies in the world have successfully amplified DNA using their own-made flow-through PCR chip. In this paper, the ablation principle of PMMA at 248 nm excimer laser was studied, then a PMMA based flow-through PCR chip with 20 cycles was fabricated by excimer laser at 19 kv and 18 mm/min. The chip was bonded together with another cover chip at 105( composite function)C, 160 N and 20 minutes. In the end, it was integrated with electrical thermal thin films and Pt 100 temperature sensors. The temperature controllers was built standard PID digital temperature controller, the temperature control precision was +/- 0.2( composite function)C. The temperature grads between the three temperature zones were 16.5 and 22.2( composite function)C respectively, the gaps between the temperature zones could realize heat insulation.

Integrated Amorphous Silicon p-i-n Temperature Sensor for CMOS Photonics.

PubMed

Rao, Sandro; Pangallo, Giovanni; Della Corte, Francesco Giuseppe

2016-01-06

Hydrogenated amorphous silicon (a-Si:H) shows interesting optoelectronic and technological properties that make it suitable for the fabrication of passive and active micro-photonic devices, compatible moreover with standard microelectronic devices on a microchip. A temperature sensor based on a hydrogenated amorphous silicon p-i-n diode integrated in an optical waveguide for silicon photonics applications is presented here. The linear dependence of the voltage drop across the forward-biased diode on temperature, in a range from 30 °C up to 170 °C, has been used for thermal sensing. A high sensitivity of 11.9 mV/°C in the bias current range of 34-40 nA has been measured. The proposed device is particularly suitable for the continuous temperature monitoring of CMOS-compatible photonic integrated circuits, where the behavior of the on-chip active and passive devices are strongly dependent on their operating temperature.

Micro-strip sensors based on CVD diamond

NASA Astrophysics Data System (ADS)

Adam, W.; Berdermann, E.; Bergonzo, P.; Bertuccio, G.; Bogani, F.; Borchi, E.; Brambilla, A.; Bruzzi, M.; Colledani, C.; Conway, J.; D'Angelo, P.; Dabrowski, W.; Delpierre, P.; Deneuville, A.; Dulinski, W.; van Eijk, B.; Fallou, A.; Fizzotti, F.; Foulon, F.; Friedl, M.; Gan, K. K.; Gheeraert, E.; Hallewell, G.; Han, S.; Hartjes, F.; Hrubec, J.; Husson, D.; Kagan, H.; Kania, D.; Kaplon, J.; Kass, R.; Koeth, T.; Krammer, M.; Logiudice, A.; Lu, R.; mac Lynne, L.; Manfredotti, C.; Meier, D.; Mishina, M.; Moroni, L.; Oh, A.; Pan, L. S.; Pernicka, M.; Peitz, A.; Perera, L.; Pirollo, S.; Procario, M.; Riester, J. L.; Roe, S.; Rousseau, L.; Rudge, A.; Russ, J.; Sala, S.; Sampietro, M.; Schnetzer, S.; Sciortino, S.; Stelzer, H.; Stone, R.; Suter, B.; Tapper, R. J.; Tesarek, R.; Trischuk, W.; Tromson, D.; Vittone, E.; Walsh, A. M.; Wedenig, R.; Weilhammer, P.; Wetstein, M.; White, C.; Zeuner, W.; Zoeller, M.; RD42 Collaboration

2000-10-01

In this article we present the performance of recent chemical vapour deposition (CVD) diamond micro-strip sensors in beam tests. In addition, we present the first comparison of a CVD diamond micro-strip sensor before and after proton irradiation.

Microcombustor

DOEpatents

Gardner, Timothy J.; Manginelli, Ronald P.; Lewis, Patrick R.; Frye-Mason, Gregory C.; Colburn, Chris

2004-09-07

A microcombustor comprises a microhotplate and a catalyst for sustained combustion on the microscale. The microhotplate has very low heat capacity and thermal conductivity that mitigate large heat losses arising from large surface-to-volume ratios typical of the microdomain. The heated catalyst enables flame ignition and stabilization, permits combustion with lean fuel/air mixtures, extends a hydrocarbon's limits of flammability, and lowers the combustion temperature. The reduced operating temperatures enable a longer microcombustor lifetime and the reduced fuel consumption enables smaller fuel supplies, both of which are especially important for portable microsystems applications. The microcombustor can be used for on-chip thermal management and for sensor applications, such as heating of a micro gas chromatography column and for use as a micro flame ionization detector.

A micro-vibration generated method for testing the imaging quality on ground of space remote sensing

NASA Astrophysics Data System (ADS)

Gu, Yingying; Wang, Li; Wu, Qingwen

2018-03-01

In this paper, a novel method is proposed, which can simulate satellite platform micro-vibration and test the impact of satellite micro-vibration on imaging quality of space optical remote sensor on ground. The method can generate micro-vibration of satellite platform in orbit from vibrational degrees of freedom, spectrum, magnitude, and coupling path. Experiment results show that the relative error of acceleration control is within 7%, in frequencies from 7Hz to 40Hz. Utilizing this method, the system level test about the micro-vibration impact on imaging quality of space optical remote sensor can be realized. This method will have an important applications in testing micro-vibration tolerance margin of optical remote sensor, verifying vibration isolation and suppression performance of optical remote sensor, exploring the principle of micro-vibration impact on imaging quality of optical remote sensor.

The effects of gamma irradiation on micro-hotplates with integrated temperature sensing diodes

NASA Astrophysics Data System (ADS)

Francis, Laurent A.; André, Nicolas; Boufouss, El Hafed; Gérard, Pierre; Ali, Zeeshan; Udrea, Florin; Flandre, Denis

2014-06-01

Micro-hotplates are MEMS structures of interest for low-power gas sensing, lab-on-chips and space applications, such as micro-thrusters. Micro-hotplates usually consist in a Joule heater suspended on a thin-film membrane while thermopiles or thermodiodes are added as temperature sensors and for feedback control. The implementation of micro-hotplates using a Silicon-On-Insulator technology makes them suited for co-integration with analog integrated circuits and operation at elevated environmental temperatures in a range from 200 to 300 °C, while the heater allows thermal cycling in the kHz regime up to 700 °C, e.g. necessary for the activation of gas sensitive metal-oxide on top of the membrane, with mWrange electrical power. The demonstrated resistance of micro-hotplates to gamma radiations can extend their use in nuclear plants, biomedical sterilization and space applications. In this work, we present results from electrical tests on micro-hotplates during their irradiation by Cobalt-60 gamma rays with total doses up to 18.90 kGy. The micro-hotplates are fabricated using a commercial 1.0 μm Silicon-On-Insulator technology with a tungsten Joule heater, which allows power-controlled operation above 600 °C with less than 60 mW, and temperature sensing silicon diodes located on the membrane and on the bulk. We show the immunity of the sensing platform to the harsh radiation environment. Beside the good tolerance of the thermodiodes and the membrane materials to the total radiation dose, the thermodiode located on the heating membrane is constantly annealed during irradiation and keeps a constant sensitivity while post-irradiation annealing can restore the thermodiode.

Pattern-Directed Ordering of Spin-Dewetted Liquid Crystal Micro- or Nanodroplets as Pixelated Light Reflectors and Locomotives.

PubMed

Ravi, Bolleddu; Chakraborty, Snigdha; Bhattacharjee, Mitradip; Mitra, Shirsendu; Ghosh, Abir; Gooh Pattader, Partho Sarathi; Bandyopadhyay, Dipankar

2017-01-11

Chemical pattern directed spin-dewetting of a macroscopic droplet composed of a dilute organic solution of liquid crystal (LC) formed an ordered array of micro- and nanoscale LC droplets. Controlled evaporation of the spin-dewetted droplets through vacuum drying could further miniaturize the size to the level of ∼90 nm. The size, periodicity, and spacing of these mesoscale droplets could be tuned with the variations in the initial loading of LC in the organic solution, the strength of the centripetal force on the droplet, and the duration of the evaporation. A simple theoretical model was developed to predict the spacing between the spin-dewetted droplets. The patterned LC droplets showed a reversible phase transition from nematic to isotropic and vice versa with the periodic exposure of a solvent vapor and its removal. A similar phase transition behavior was also observed with the periodic increase or reduction of temperature, suggesting their usefulness as vapor or temperature sensors. Interestingly, when the spin-dewetted droplets were confined between a pair of electrodes and an external electric field was applied, the droplets situated at the hydrophobic patches showed light-reflecting properties under the polarization microscopy highlighting their importance in the development of micro- or nanoscale LC displays. The digitized LC droplets, which were stationary otherwise, showed dielectrophoretic locomotion under the guidance of the external electric field beyond a threshold intensity of the field. Remarkably, the motion of these droplets could be restricted to the hydrophilic zones, which were confined between the hydrophobic patches of the chemically patterned surface. The findings could significantly contribute in the development of futuristic vapor or temperature sensors, light reflectors, and self-propellers using the micro- or nanoscale digitized LC droplets.

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications.

PubMed

Mansoor, Mohtashim; Haneef, Ibraheem; Akhtar, Suhail; Rafiq, Muhammad Aftab; De Luca, Andrea; Ali, Syed Zeeshan; Udrea, Florin

2016-11-04

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA-0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C-1.79 mV/°C in the range 20-300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(V excit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min) -0.1 in the tested range of 0-4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries.

An SOI CMOS-Based Multi-Sensor MEMS Chip for Fluidic Applications †

PubMed Central

Mansoor, Mohtashim; Haneef, Ibraheem; Akhtar, Suhail; Rafiq, Muhammad Aftab; De Luca, Andrea; Ali, Syed Zeeshan; Udrea, Florin

2016-01-01

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature, pressure and flow rate, has been reported. The multi-sensor chip has been designed keeping in view the requirements of researchers interested in experimental fluid dynamics. The chip contains ten thermodiodes (temperature sensors), a piezoresistive-type pressure sensor and nine hot film-based flow rate sensors fabricated within the oxide layer of the SOI wafers. The silicon dioxide layers with embedded sensors are relieved from the substrate as membranes with the help of a single DRIE step after chip fabrication from a commercial CMOS foundry. Very dense sensor packing per unit area of the chip has been enabled by using technologies/processes like SOI, CMOS and DRIE. Independent apparatuses were used for the characterization of each sensor. With a drive current of 10 µA–0.1 µA, the thermodiodes exhibited sensitivities of 1.41 mV/°C–1.79 mV/°C in the range 20–300 °C. The sensitivity of the pressure sensor was 0.0686 mV/(Vexcit kPa) with a non-linearity of 0.25% between 0 and 69 kPa above ambient pressure. Packaged in a micro-channel, the flow rate sensor has a linearized sensitivity of 17.3 mV/(L/min)−0.1 in the tested range of 0–4.7 L/min. The multi-sensor chip can be used for simultaneous measurement of fluid pressure, temperature and flow rate in fluidic experiments and aerospace/automotive/biomedical/process industries. PMID:27827904

Differential temperature stress measurement employing array sensor with local offset

NASA Technical Reports Server (NTRS)

Lesniak, Jon R. (Inventor)

1993-01-01

The instrument has a focal plane array of infrared sensors of the integrating type such as a multiplexed device in which a charge is built up on a capacitor which is proportional to the total number of photons which that sensor is exposed to between read-out cycles. The infrared sensors of the array are manufactured as part of an overall array which is part of a micro-electronic device. The sensor achieves greater sensitivity by applying a local offset to the output of each sensor before it is converted into a digital word. The offset which is applied to each sensor will typically be the sensor's average value so that the digital signal which is periodically read from each sensor of the array corresponds to the portion of the signal which is varying in time. With proper synchronization between the cyclical loading of the test object and the frame rate of the infrared array the output of the A/D converted signal will correspond to the stress field induced temperature variations. A digital lock-in operation may be performed on the output of each sensor in the array. This results in a test instrument which can rapidly form a precise image of the thermoelastic stresses in an object.

Design of micro-ring optical sensors and circuits for integration on optical printed circuit boards (O-PCBs)

NASA Astrophysics Data System (ADS)

Lee, El-Hang; Lee, Hyun S.; Lee, S. G.; O, B. H.; Park, S. G.; Kim, K. H.

2007-05-01

We report on the design of micro-ring resonator optical sensors for integration on what we call optical printed circuit boards (O-PCBs). The objective is to realize application-specific O-PCBs, either on hard board or on flexible board, by integrating micro/nano-scale optical sensors for compact, light-weight, low-energy, high-speed, intelligent, and environmentally friendly processing of information. The O-PCBs consist of two-dimensional planar arrays of micro/nano-scale optical wires, circuits and devices that are interconnected and integrated to perform the functions of sensing and then storing, transporting, processing, switching, routing and distributing optical signals that have been collected by means of sensors. For fabrication, the polymer and organic optical wires and waveguides are first fabricated on a board and are used to interconnect and integrate sensors and other micro/ nano-scale photonic devices. Here, in our study, we focus on the sensors based on the micro-ring structures. We designed bio-sensors using silicon based micro-ring resonator. We investigate the characteristics such as sensitivity and selectivity (or quality factor) of micro-ring resonator for their use in bio-sensing application. We performed simulation studies on the quality factor of micro-ring resonators by varying the radius of the ring resonators and the separation between adjacent waveguides. We introduce the effective coupling coefficient as a realistic value to describe the strength of the coupling in micro-ring resonators.

MEMS inertial sensors with integral rotation means.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kohler, Stewart M.

The state-of-the-art of inertial micro-sensors (gyroscopes and accelerometers) has advanced to the point where they are displacing the more traditional sensors in many size, power, and/or cost-sensitive applications. A factor limiting the range of application of inertial micro-sensors has been their relatively poor bias stability. The incorporation of an integral sensitive axis rotation capability would enable bias mitigation through proven techniques such as indexing, and foster the use of inertial micro-sensors in more accuracy-sensitive applications. Fabricating the integral rotation mechanism in MEMS technology would minimize the penalties associated with incorporation of this capability, and preserve the inherent advantages of inertialmore » micro-sensors.« less

A Smart High Accuracy Silicon Piezoresistive Pressure Sensor Temperature Compensation System

PubMed Central

Zhou, Guanwu; Zhao, Yulong; Guo, Fangfang; Xu, Wenju

2014-01-01

Theoretical analysis in this paper indicates that the accuracy of a silicon piezoresistive pressure sensor is mainly affected by thermal drift, and varies nonlinearly with the temperature. Here, a smart temperature compensation system to reduce its effect on accuracy is proposed. Firstly, an effective conditioning circuit for signal processing and data acquisition is designed. The hardware to implement the system is fabricated. Then, a program is developed on LabVIEW which incorporates an extreme learning machine (ELM) as the calibration algorithm for the pressure drift. The implementation of the algorithm was ported to a micro-control unit (MCU) after calibration in the computer. Practical pressure measurement experiments are carried out to verify the system's performance. The temperature compensation is solved in the interval from −40 to 85 °C. The compensated sensor is aimed at providing pressure measurement in oil-gas pipelines. Compared with other algorithms, ELM acquires higher accuracy and is more suitable for batch compensation because of its higher generalization and faster learning speed. The accuracy, linearity, zero temperature coefficient and sensitivity temperature coefficient of the tested sensor are 2.57% FS, 2.49% FS, 8.1 × 10−5/°C and 29.5 × 10−5/°C before compensation, and are improved to 0.13%FS, 0.15%FS, 1.17 × 10−5/°C and 2.1 × 10−5/°C respectively, after compensation. The experimental results demonstrate that the proposed system is valid for the temperature compensation and high accuracy requirement of the sensor. PMID:25006998

Sensitivity enhancement in optical micro-tube resonator sensors via mode coupling

NASA Astrophysics Data System (ADS)

Ling, Tao; Guo, L. Jay

2013-07-01

A liquid filled, silica micro-tube with a low refractive index material inner-coating has been proposed and theoretically studied as a coupled micro-resonator sensor to greatly enhance biochemical sensor sensitivity. Its unique coupling phenomenon has been analyzed and utilized to boost the device's refractive index sensitivity to 967 nm/Refractive Index Unit (RIU). Through optimization of the coupling strength between the two micro-resonators, further improvement in refractive index sensitivity up to 1100 nm/RIU has been predicted. This mode coupling strategy allows us to design robust, thick-walled micro-tube sensors with ultra-high sensitivity which is useful in practical biochemical sensing applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1997-01-01

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor (50). An optical fiber micro-light source (50) is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors (22) in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material (60). This process allows significant control of the size of the micro light source (50). Furthermore, photo-chemically attaching an optically active material (60) enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1997-05-06

This invention relates generally to the development of and a method of fabricating a fiber optic micro-light source and sensor. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 10 figs.

NASA Tech Briefs, April 2004

NASA Technical Reports Server (NTRS)

2004-01-01

Topics covered include: Analysis of SSEM Sensor Data Using BEAM; Hairlike Percutaneous Photochemical Sensors; Video Guidance Sensors Using Remotely Activated Targets; Simulating Remote Sensing Systems; EHW Approach to Temperature Compensation of Electronics; Polymorphic Electronic Circuits; Micro-Tubular Fuel Cells; Whispering-Gallery-Mode Tunable Narrow-Band-Pass Filter; PVM Wrapper; Simulation of Hyperspectral Images; Algorithm for Controlling a Centrifugal Compressor; Hybrid Inflatable Pressure Vessel; Double-Acting, Locking Carabiners; Position Sensor Integral with a Linear Actuator; Improved Electromagnetic Brake; Flow Straightener for a Rotating-Drum Liquid Separator; Sensory-Feedback Exoskeletal Arm Controller; Active Suppression of Instabilities in Engine Combustors; Fabrication of Robust, Flat, Thinned, UV-Imaging CCDs; Chemical Thinning Process for Fabricating UV-Imaging CCDs; Pseudoslit Spectrometer; Waste-Heat-Driven Cooling Using Complex Compound Sorbents; Improved Refractometer for Measuring Temperatures of Drops; Semiconductor Lasers Containing Quantum Wells in Junctions; Phytoplankton-Fluorescence-Lifetime Vertical Profiler; Hexagonal Pixels and Indexing Scheme for Binary Images; Finding Minimum-Power Broadcast Trees for Wireless Networks; and Automation of Design Engineering Processes.

A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer

PubMed Central

Ke, Ming-Tsun; Lee, Mu-Tsun; Lee, Chia-Yen; Fu, Lung-Ming

2009-01-01

In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This causes a change in the electrical conductivity of the WO3 film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parameters. It is found that the sensitivity of the gas sensor is optimized at a working temperature of 300 °C. At the optimal working temperature, the experimental results show that the sensor has a high degree of sensitivity (1.0 KΩ ppm−1), a low detection limit (0.2 ppm) and a rapid response time (35 s). PMID:22574052

Pulse-driven micro gas sensor fitted with clustered Pd/SnO2 nanoparticles.

PubMed

Suematsu, Koichi; Shin, Yuka; Ma, Nan; Oyama, Tokiharu; Sasaki, Miyuki; Yuasa, Masayoshi; Kida, Tetsuya; Shimanoe, Kengo

2015-08-18

Real-time monitoring of specific gas concentrations with a compact and portable gas sensing device is required to sense potential health risk and danger from toxic gases. For such purposes, we developed an ultrasmall gas sensor device, where a micro sensing film was deposited on a micro heater integrated with electrodes fabricated by the microelectromechanical system (MEMS) technology. The developed device was operated in a pulse-heating mode to significantly reduce the heater power consumption and make the device battery-driven and portable. Using clustered Pd/SnO2 nanoparticles, we succeeded in introducing mesopores ranging from 10 to 30 nm in the micro gas sensing film (area: ϕ 150 μm) to detect large volatile organic compounds (VOCs). The micro sensor showed quick, stable, and high sensor responses to toluene at ppm (parts per million) concentrations at 300 °C even by operating the micro heater in a pulse-heating mode where switch-on and -off cycles were repeated at one-second intervals. The high performance of the micro sensor should result from the creation of efficient diffusion paths decorated with Pd sensitizers by using the clustered Pd/SnO2 nanoparticles. Hence we demonstrate that our pulse-driven micro sensor using nanostructured oxide materials holds promise as a battery-operable, portable gas sensing device.

Development of Individually Addressable Micro-Mirror-Arrays for Space Applications

NASA Technical Reports Server (NTRS)

Dutta, Sanghamitra B.; Ewin, Audrey J.; Jhabvala, Murzy; Kotecki, Carl A.; Kuhn, Jonathan L.; Mott, D. Brent

2000-01-01

We have been developing a 32 x 32 prototype array of individually addressable Micro-Mirrors capable of operating at cryogenic temperature for Earth and Space Science applications. Micro-Mirror-Array technology has the potential to revolutionize imaging and spectroscopy systems for NASA's missions of the 21st century. They can be used as programmable slits for the Next Generation Space Telescope, as smart sensors for a steerable spectrometer, as neutral density filters for bright scene attenuation etc. The, entire fabrication process is carried out in the Detector Development Laboratory at NASA, GSFC. The fabrication process is low temperature compatible and involves integration of conventional CMOS technology and surface micro-machining used in MEMS. Aluminum is used as the mirror material and is built on a silicon substrate containing the CMOS address circuit. The mirrors are 100 microns x l00 microns in area and deflect by +/- 10 deg induced by electrostatic actuation between two parallel plate capacitors. A pair of thin aluminum torsion straps allow the mirrors to tilt. Finite-element-analysis and closed form solutions using electrostatic and mechanical torque for mirror operation were developed and the results were compared with laboratory performance. The results agree well both at room temperature and at cryogenic temperature. The development demonstrates the first cryogenic operation of two-dimensional Micro-Mirrors with bi-state operation. Larger arrays will be developed meeting requirements for different science applications. Theoretical analysis, fabrication process, laboratory test results and different science applications will be described in detail.

AVHRR, MODIS, and VIIRS radiometric stability and consistency in SST bands

NASA Astrophysics Data System (ADS)

Liang, XingMing; Ignatov, Alexander

2013-06-01

Monitoring of IR Clear-Sky Radiances over Oceans for SST (MICROS; www.star.nesdis.noaa.gov/sod/sst/micros) is NESDIS near-real time web-based radiance monitoring system. It analyzes Model (Community Radiative Transfer Model, CRTM) minus Observation (M-O) biases in brightness temperatures (BT) in three bands centered at 3.7 (IR37), 11 (IR11), and 12 µm (IR12), for several AVHRR (NOAA-16, -17, -18, -19, Metop-A, -B), VIIRS (Suomi National Polar Partnership, S-NPP), and MODIS (Terra, Aqua) sensors. Double-differences (DD) are employed to check BTs for radiometric stability and consistency. All sensors are stable, with the exception of two AVHRRs, onboard NOAA-16 and to a lesser extent NOAA-18, and generally consistent. VIIRS onboard S-NPP, launched in October 2011, is well in-family, especially after its calibration was fine-tuned on 7 March 2012. MODIS M-O biases were initially out-of-family by up to -0.6 K, due to incorrect CRTM transmittance coefficients. Following MICROS feedback, CRTM Team updated coefficients and brought MODIS back in-family. Terra and Aqua BTs are very consistent in IR11 and IR12 but show cross-platform bias of 0.3 K in IR37, likely attributed to MODIS characterization. Work with MODIS Characterization Support Team is underway to resolve this. Initial analyses of AVHRR onboard Metop-B launched in September 2012 suggest that its BTs are offset from Metop-A by up to ˜0.3 K. Overall, MICROS DDs are well suited to evaluate the sensors stability, but dedicated effort is needed to ensure consistent radiative transfer modeling (RTM) calculations for various sensors before DDs can be used in Global Space-based Inter-Calibration System (GSICS) quantitative applications.

High temperature superconductor dc SQUID micro-susceptometer for room temperature objects

NASA Astrophysics Data System (ADS)

Faley, M. I.; Pratt, K.; Reineman, R.; Schurig, D.; Gott, S.; Atwood, C. G.; Sarwinski, R. E.; Paulson, D. N.; Starr, T. N.; Fagaly, R. L.

2004-05-01

We have developed a scanning magnetic microscope (SMM) with 25 µm resolution in spatial position for the magnetic features of room temperature objects. The microscope consists of a high-temperature superconductor (HTS) dc SQUID sensor, suspended in vacuum with a self-adjusting standoff, close spaced liquid nitrogen Dewar, X-Y scanning stage and a computer control system. The HTS SQUIDs were optimized for better spatial and field resolutions for operation at liquid nitrogen temperature. Measured inside a magnetic shield, the 10 pT Hz-1/2 typical noise of the SQUIDs is white down to frequencies of about 10 Hz, increasing up to about 20 pT Hz-1/2 at 1 Hz. The microscope is mounted on actively damped platforms, which negate vibrations from the environment as well as damping internal stepper motor noises. A high-resolution video telescope and a 1 µm precision z-axis positioning system allow a close positioning of the sample under the sensor. The ability of the sensors to operate in unshielded environmental conditions with magnetic fields up to about 15 G allowed us to perform 2D mapping of the local ac and dc susceptibility of the objects.

Strain and Temperature Sensing Properties of Multiwalled Carbon Nanotube Yarn Composites

NASA Technical Reports Server (NTRS)

Kahng, Seun K.; Gates, Thomas S.; Jefferson, Gail D.

2008-01-01

Strain and temperature response of Multiwalled Carbon Nanotube (MWCNT/CNT) yarns on a stainless steel test beam has been studied. The carbon nanotube yarns are spun from a multiwalled carbon nanotube forest grown on a silicon substrate to a 4-ply yarn with a diameter of about 15-20 microns. Four of the 4-ply CNT yarns are arranged in a Wheatstone bridge configuration on the stainless steel test beam using a thin layer of polyurethane resin that insulates and protects the yarns from the test beam. Strain sensitivities of the CNT yarn sensors range from 1.39 to 1.75 mV/V/1000 microstrain at room temperature, and temperature sensitivity of the CNT yarn bridge is 91 microA/degC. Resistance of the yarns range from 215 to 270 ohms for CNT yarn length of approximately 5 mm. Processes used in attaching the CNT yarns on the test beam and experimental procedures used for the measurements are described. Conventional metallic foil strain gages are attached to the test beam to compare with the CNT sensors. The study demonstrates multifunctional capability of the sensor for strain and temperature measurements and shows its applicability where engineering strain is less than 3%.

MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

NASA Astrophysics Data System (ADS)

Kwak, Seungmin; Shim, Young-Seok; Yoo, Yong Kyoung; Lee, Jin-Hyung; Kim, Inho; Kim, Jinseok; Lee, Kyu Hyoung; Lee, Jeong Hoon

2018-03-01

We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human's life.

MEMS-Based Gas Sensor Using PdO-Decorated TiO2 Thin Film for Highly Sensitive and Selective H2 Detection with Low Power Consumption

NASA Astrophysics Data System (ADS)

Kwak, Seungmin; Shim, Young-Seok; Yoo, Yong Kyoung; Lee, Jin-Hyung; Kim, Inho; Kim, Jinseok; Lee, Kyu Hyoung; Lee, Jeong Hoon

2018-05-01

We report a micromachined H2 sensor that is composed of a Pt micro-heater, low-stress insulating layer (SiO2/SiNx/SiO2), Pt-interdigitated electrodes, and gas sensing materials. Three types of Pt micro-heater are designed as function of electrode width, and their thermal properties are systematically analyzed by finite element modeling FEM with infrared camera. The power consumptions when the surface temperature reached 150, 200, 250, and 300 °C are calculated to approximately 33, 48, 67 and 85 mW, respectively. The response of the PdO nanoparticles-decorated TiO2 thin films to H2 is much higher than those of other gases such as CH4 and CO at 200 °C (48 mW). Further, the response time is reduced to approximately 3 s. The enhancement of gas sensing properties is related to well-designed micro-heater and catalytic effects of PdO nanoparticles such as electronic and chemical sensitization. These results suggest that the PdO nanoparticles-decorated TiO2 thin film, namely MEMS-based H2 sensors are very promising for use in IoT application to improve the quality of human's life.

On-Chip Photothermal Analyte Detection Using Integrated Luminescent Temperature Sensors.

PubMed

Pfeiffer, Simon A; Nagl, Stefan

2017-09-05

Optical absorbance detection based on attenuated light transmission is limited in sensitivity due to short path lengths in microfluidic and other miniaturized platforms. An alternative is detection using the photothermal effect. Herein we introduce a new kind of photothermal absorbance measurement using integrated luminescent temperature sensor spots inside microfluidic channels. The temperature sensors were photopolymerized inside the channels from NOA 81 UV-curable thiolene prepolymer doped with a tris(1,10-phenanthroline)ruthenium(II) temperature probe. The polymerized sensing structures were as small as 26 ± 3 μm in diameter and displayed a temperature resolution of better than 0.3 K between 20 and 50 °C. The absorbance from 532 nm laser excitation of the food dye Amaranth as a model analyte was quantified using these spots, and the influence of the flow rate, laser power, and concentration was investigated. Calibration yielded a linear relationship between analyte concentration and the temperature signal in the channels. The limit of detection for the azo-dye Amaranth (E123) in this setup was 13 μM. A minimal detectable absorbance of 3.2 × 10 -3 AU was obtained using an optical path length of 125 μm in this initial study. A microreactor with integrated temperature sensors was then employed for an absorbance-based miniaturized nitrite analysis, yielding a detection limit of 26 μM at a total assay time of only 75 s. This technique is very promising for sensitive, and potentially spatially resolved, optical absorbance detection on the micro- and nanoscale.

Recent progress in MEMS technology development for military applications

NASA Astrophysics Data System (ADS)

Ruffin, Paul B.; Burgett, Sherrie J.

2001-08-01

The recent progress of ongoing efforts at the Army Aviation and Missile Command (AMCOM) to develop microelectromechanical systems (MEMS) technology for military applications is discussed in this paper. The current maturity level of low cost, low power, micro devices in industry, which range from simple temperature and pressure sensors to accelerometers in airbags, provides a viable foundation for the development of rugged MEMS devices for dual-use applications. Early MEMS technology development efforts at AMCOM emphasized inertial MEMS sensors. An Army Science and Technology Objective (STO) project was initiated to develop low cost inertial components with moderate angular rate sensor resolution for measuring pitch and yaw of missile attitude and rotational roll rate. Leveraging the Defense Advanced Research Projects Agency and other Government agencies has resulted in the development of breadboard inertial MEMS devices with improved robustness. During the past two years, MEMS research at AMCOM has been expanded to include environmental MEMS sensors for missile health monitoring, RF-MEMS, optical MEMS devices for beam steering, and micro-optic 'benches' for opto-electronics miniaturization. Additionally, MEMS packaging and integration issues have come into focus and are being addressed. Selected ongoing research efforts in these areas are presented, and some horizon MEMS sensors requirements for Army and law enforcement are presented for consideration.

Heat convection in a micro impinging jet system

NASA Astrophysics Data System (ADS)

Mai, John Dzung Hoang

2000-10-01

This thesis covers the development of an efficient micro impinging jet heat exchanger, using MEMS technology, to provide localized cooling for present and next generation microelectronic computer chips. Before designing an efficient localized heat exchanger, it is necessary to investigate fluid dynamics and heat transfer in the micro scale. MEMS technology has been used in this project because it is the only tool currently available that can provide a large array of batch-fabricated, micro-scale nozzles for localized cooling. Our investigation of potential MEMS heat exchanger designs begins with experiments that measure the pressure drops and temperature changes in a micro scale tubing system that will be necessary to carry fluid to the impingement point. Our basic MEMS model is a freestanding micro channel with integrated temperature microsensors. The temperature distribution along the channel in a vacuum is measured. The measured flow rates are compared with an analytical model developed for capillary flow that accounts for 2-D, slip and compressibility effects. The work is focused on obtaining correlations in the form of the Nussult number, the Reynolds number and a H/d geometric factor. A set of single MEMS nozzles have been designed to test heat transfer effectiveness as a function of nozzle diameter, ranging from 1.0 mm to 250 um. In addition, nozzle and slot array MEMS devices have been fabricated. In order to obtain quantitative measurements from these micron scale devices, a series of target temperature sensor chips were custom made and characterized for these experiments. The heat transfer characteristics of various MEMS nozzle configurations operating at various steady inlet pressures, at different heights above the heated substrate, have been characterized. These steady results showed that the average heat transfer coefficient, averaged over a 1 cm2 test area, was usually less than 0.035 W/cm 2K for any situation. However, the local heat transfer coefficient, as measured by a single 4mum x 4mum temperature sensor, was as high as 0.5 W/cm2K. Using a mechanical valve and piezo actuator to perturb the flow at frequencies from 10 Hz to 1 kHz, we identify that enhanced heat transfer can occur in an unsteady forced jet. The functional dependence of the enhanced heat transfer on the mean jet speed, perturbation level and perturbing frequency has been established. The expected trend that increased heat transfer at higher values of St number was noticed. In addition the effect of a confined and free jet geometry on an unsteady flow was observed.

Experimental study on structural, optoelectronic and room temperature sensing performance of Nickel doped ZnO based ethanol sensors

NASA Astrophysics Data System (ADS)

Sudha, M.; Radha, S.; Kirubaveni, S.; Kiruthika, R.; Govindaraj, R.; Santhosh, N.

2018-04-01

Nano crystalline undoped (1Z) Zinc Oxide (ZnO) and 5, 10 and 15 Wt. % (1ZN, 2ZN and 3ZN) of Nickel doped ZnO based sensors were fabricated using the hydrothermal approach on Fluorine doped Tin Oxide (FTO) glass substrates. X-ray diffraction (XRD) analysis proved the hexagonal Wurtzite structure of ZnO. Parametric variations in terms of dislocation density, bond length, lattice parameters and micro strain with respect to dopant concentration were analysed. The prominent variations in the crystallite size, optical band gap and Photoluminescence peak ratio of devices fabricated was observed. The Field Emission Scanning Electron Microscope (FESEM) images showed a change in diameter and density of the nanorods. The effect of the operating temperature, concentration of ethanol and the different doping levels of sensitivity, response and recovery time were investigated. It was inferred that 376% of sensitivity with a very quick response and recovery time of <5 s and 10 s respectively at 150 °C of 3ZN sensor has better performance compared to other three sensors. Also 3ZN sensor showed improved sensitivity of 114%, even at room temperature with response and recovery time of 35 s and 45 s respectively.

Tissue viability monitoring: a multi-sensor wearable platform approach

NASA Astrophysics Data System (ADS)

Mathur, Neha; Davidson, Alan; Buis, Arjan; Glesk, Ivan

2016-12-01

Health services worldwide are seeking ways to improve patient care for amputees suffering from diabetes, and at the same time reduce costs. The monitoring of residual limb temperature, interface pressure and gait can be a useful indicator of tissue viability in lower limb amputees especially to predict the occurrence of pressure ulcers. This is further exacerbated by elevated temperatures and humid micro environment within the prosthesis which encourages the growth of bacteria and skin breakdown. Wearable systems for prosthetic users have to be designed such that the sensors are minimally obtrusive and reliable enough to faithfully record movement and physiological signals. A mobile sensor platform has been developed for use with the lower limb prosthetic users. This system uses an Arduino board that includes sensors for temperature, gait, orientation and pressure measurements. The platform transmits sensor data to a central health authority database server infrastructure through the Bluetooth protocol at a suitable sampling rate. The data-sets recorded using these systems are then processed using machine learning algorithms to extract clinically relevant information from the data. Where a sensor threshold is reached a warning signal can be sent wirelessly together with the relevant data to the patient and appropriate medical personnel. This knowledge is also useful in establishing biomarkers related to a possible deterioration in a patient's health or for assessing the impact of clinical interventions.

Human Location Detection System Using Micro-Electromechanical Sensor for Intelligent Fan

NASA Astrophysics Data System (ADS)

Parnin, S.; Rahman, M. M.

2017-03-01

This paper presented the development of sensory system for detection of both the presence and the location of human in a room spaces using MEMS Thermal sensor. The system is able to detect the surface temperature of occupants by a non-contact detection at the maximum of 6 meters far. It can be integrated to any swing type of electrical appliances such as standing fan or a similar devices. Differentiating human from other moving and or static object by heat variable is nearly impossible since human, animals and electrical appliances produce heat. The uncontrollable heat properties which can change and transfer will add to the detection issue. Integrating the low cost MEMS based thermal sensor can solve the first of human sensing problem by its ability to detect human in stationary. Further discrimination and analysis must therefore be made to the measured temperature data to distinguish human from other objects. In this project, the fan is properly designed and program in such a way that it can adapt to different events starting from the human sensing stage to its dynamic and mechanical moving parts. Up to this stage initial testing to the Omron D6T microelectromechanical thermal sensor is currently under several experimental stages. Experimental result of the sensor tested on stationary and motion state of human are behaviorally differentiable and successfully locate the human position by detecting the maximum temperature of each sensor reading.

Electro-thermo-mechanical nonlinear nonlocal vibration and instability of embedded micro-tube reinforced by BNNT, conveying fluid

NASA Astrophysics Data System (ADS)

Ghorbanpour Arani, A.; Shajari, A. R.; Amir, S.; Loghman, A.

2012-08-01

Nonlinear vibration and stability of a smart composite micro-tube made of Poly-vinylidene fluoride (PVDF) reinforced by Boron-Nitride nanotubes (BNNTs) embedded in an elastic medium under electro-thermal loadings is investigated. The BNNTs are considered to be long straight fibers and the composite used in this study is in the category of piezoelectric fiber reinforced composites (PEFRC). The micro-tube is conveying a fully developed isentropic, incompressible and irrotational fluid flow. The smart micro-tube is modeled as a thin shell based on the nonlinear Donnell's shell theory. Effects of mean flow velocity, fluid viscosity, elastic medium modulus, temperature change, imposed electric potential, small scale, aspect ratio, volume percent and orientation angle of the BNNTs on the vibration behavior of the micro-tube are taken into account. The results indicate that increasing mean flow velocity considerably increases the nonlinearity effects so that small scale and temperature change effects become negligible. It has also been found that stability of the system is strongly dependent on the imposed electric potential and the volume percent of BNNTs reinforcement. The system studied in this article can be used as sensor and actuator in the sensitive applications.

An integrated micro-volume fiber-optic sensor for oxygen determination in exhaled breath based on iridium(III) complexes immobilized in fluorinated xerogels.

PubMed

Xiong, Yan; Ye, Zhongbin; Xu, Jing; Zhu, Yuanqiang; Chen, Chen; Guan, Yafeng

2013-03-21

A novel integrated fiber-optic sensor with micro detection volume is developed and evaluated for O(2) determination on a breath-by-breath basis in human health monitoring applications. The sensing element was fabricated by dip-coating an uncladded optical fiber with [Ir(piq)(2)(acac)]-doped hybrid fluorinated ORMOSIL (organically modified silicate) film, which was prepared from 3,3,3-trifluoropropyltrimethoxysilane (TFP-TriMOS) and n-propyltrimethoxysilane (n-propyl-TriMOS). The sensor was then constructed by inserting the prepared optical fiber into a transparent capillary. A microchannel formed between the optical fiber and the capillary inner wall acted as a flow cell for the sample flowing through. The evanescent wave (EW) field produced on the fiber core surface can excite the O(2)-sensitive fluorophores of [Ir(piq)(2)(acac)] to produce emission fluorescence. O(2) can be sensed by its quenching effect on the emission fluorescence intensity. Spectroscopic properties have been characterized by FTIR and fluorescence measurements. Stern-Volmer and Demas models were both employed to analyse the sensor sensitivity, which is 13.0 with the LOD = 0.009% (3σ) and the response time is about 1 s. By integrating the sensing and detection elements on the optical fiber, the novel configuration showed advantages of easy fabrication and low cost. Parameters of sensitivity, response time, repeatability, humidity effect and temperature effect were discussed in detail. The proposed sensor showed potential for practical in-breath O(2) analysis application due to its advantages of easy fabrication, low cost, fast response, excellent hydrophobicity, negligible temperature interference and suitable sensitivity.

A Micromachined Capacitive Pressure Sensor Using a Cavity-Less Structure with Bulk-Metal/Elastomer Layers and Its Wireless Telemetry Application

PubMed Central

Takahata, Kenichi; Gianchandani, Yogesh B.

2008-01-01

This paper reports a micromachined capacitive pressure sensor intended for applications that require mechanical robustness. The device is constructed with two micromachined metal plates and an intermediate polymer layer that is soft enough to deform in a target pressure range. The plates are formed of micromachined stainless steel fabricated by batch-compatible micro-electro-discharge machining. A polyurethane room-temperature-vulcanizing liquid rubber of 38-μm thickness is used as the deformable material. This structure eliminates both the vacuum cavity and the associated lead transfer challenges common to micromachined capacitive pressure sensors. For frequency-based interrogation of the capacitance, passive inductor-capacitor tanks are fabricated by combining the capacitive sensor with an inductive coil. The coil has 40 turns of a 127-μm-diameter copper wire. Wireless sensing is demonstrated in liquid by monitoring the variation in the resonant frequency of the tank via an external coil that is magnetically coupled with the tank. The sensitivity at room temperature is measured to be 23-33 ppm/KPa over a dynamic range of 340 KPa, which is shown to match a theoretical estimation. Temperature dependence of the tank is experimentally evaluated. PMID:27879824

Reliable aluminum contact formation by electrostatic bonding

NASA Astrophysics Data System (ADS)

Kárpáti, T.; Pap, A. E.; Radnóczi, Gy; Beke, B.; Bársony, I.; Fürjes, P.

2015-07-01

The paper presents a detailed study of a reliable method developed for aluminum fusion wafer bonding assisted by the electrostatic force evolving during the anodic bonding process. The IC-compatible procedure described allows the parallel formation of electrical and mechanical contacts, facilitating a reliable packaging of electromechanical systems with backside electrical contacts. This fusion bonding method supports the fabrication of complex microelectromechanical systems (MEMS) and micro-opto-electromechanical systems (MOEMS) structures with enhanced temperature stability, which is crucial in mechanical sensor applications such as pressure or force sensors. Due to the applied electrical potential of  -1000 V the Al metal layers are compressed by electrostatic force, and at the bonding temperature of 450 °C intermetallic diffusion causes aluminum ions to migrate between metal layers.

Novel auto-correction method in a fiber-optic distributed-temperature sensor using reflected anti-Stokes Raman scattering.

PubMed

Hwang, Dusun; Yoon, Dong-Jin; Kwon, Il-Bum; Seo, Dae-Cheol; Chung, Youngjoo

2010-05-10

A novel method for auto-correction of fiber optic distributed temperature sensor using anti-Stokes Raman back-scattering and its reflected signal is presented. This method processes two parts of measured signal. One part is the normal back scattered anti-Stokes signal and the other part is the reflected signal which eliminate not only the effect of local losses due to the micro-bending or damages on fiber but also the differential attenuation. Because the beams of the same wavelength are used to cancel out the local variance in transmission medium there is no differential attenuation inherently. The auto correction concept was verified by the bending experiment on different bending points. (c) 2010 Optical Society of America.

One-Dimensional Oxide Nanostructures as Gas-Sensing Materials: Review and Issues

PubMed Central

Choi, Kyoung Jin; Jang, Ho Won

2010-01-01

In this article, we review gas sensor application of one-dimensional (1D) metal-oxide nanostructures with major emphases on the types of device structure and issues for realizing practical sensors. One of the most important steps in fabricating 1D-nanostructure devices is manipulation and making electrical contacts of the nanostructures. Gas sensors based on individual 1D nanostructure, which were usually fabricated using electron-beam lithography, have been a platform technology for fundamental research. Recently, gas sensors with practical applicability were proposed, which were fabricated with an array of 1D nanostructures using scalable micro-fabrication tools. In the second part of the paper, some critical issues are pointed out including long-term stability, gas selectivity, and room-temperature operation of 1D-nanostructure-based metal-oxide gas sensors. PMID:22319343

Multiparametric methane sensor for environmental monitoring

NASA Astrophysics Data System (ADS)

Borecki, M.; Duk, M.; Kociubiński, A.; Korwin-Pawlowski, M. L.

2016-12-01

Today, methane sensors find applications mostly in safety alarm installations, gas parameters detection and air pollution classification. Such sensors and sensors elements exists for industry and home use. Under development area of methane sensors application is dedicated to ground gases monitoring. Proper monitoring of soil gases requires reliable and maintenance-free semi-constant and longtime examination at relatively low cost of equipment. The sensors for soil monitoring have to work on soil probe. Therefore, sensor is exposed to environment conditions, as a wide range of temperatures and a full scale of humidity changes, as well as rain, snow and wind, that are not specified for classical methane sensors. Development of such sensor is presented in this paper. The presented sensor construction consists of five commercial non dispersive infra-red (NDIR) methane sensing units, a set of temperature and humidity sensing units, a gas chamber equipped with a micro-fan, automated gas valves and also a microcontroller that controls the measuring procedure. The electronics part of sensor was installed into customized 3D printed housing equipped with self-developed gas valves. The main development of proposed sensor is on the side of experimental evaluation of construction reliability and results of data processing included safety procedures and function for hardware error correction. Redundant methane sensor units are used providing measurement error correction as well as improved measurement accuracy. The humidity and temperature sensors are used for internal compensation of methane measurements as well as for cutting-off the sensor from the environment when the conditions exceed allowable parameters. Results obtained during environment sensing prove that the gas concentration readings are not sensitive to gas chamber vertical or horizontal position. It is important as vertical sensor installation on soil probe is simpler that horizontal one. Data acquired during six month of environment monitoring prove that error correction of methane sensing units was essential for maintenance free sensor operation, despite used safety procedures.

Using the MicroASAR on the NASA SIERRA UAS in the Characterization of Arctic Sea Ice Experiment

DTIC Science & Technology

2010-05-01

such that the dechirped signal is at an intermediate frequency. Feedthrough rejection is done by a surface acoustic wave (SAW) filter with its first...Fig. 3. NASA SIERRA UAS 3-View and Specifications • Up-looking and down-looking shortwave spectrometers. • Down-looking temperature sensors ( pyrometers

Thermal Design for the Micro-X Rocket Payload

NASA Astrophysics Data System (ADS)

Goldfinger, D. C.; Figueroa-Feliciano, E.; Danowski, M.; Heine, S. N. T.

2016-08-01

Micro-X is a NASA funded, rocket borne X-ray imaging spectrometer that uses transition edge sensors (TESs) to do high-resolution microcalorimetry. The TESs are cooled by an adiabatic demagnetization refrigerator, whose salt pill functions as a heat sink for the detectors. We have made a thermal model of the cryostat with SPICE for the purposes of understanding its behavior at low temperatures. Implementing modifications based on this model has further allowed us to cool the system down to a lower temperature than had previously been accessible and to improve its low-temperature hold time. These modifications include a variety of schemes for power through heat sinks and tweaking the conductance between the cold baths and the refrigerated hardware. We present an overview of the model and its constituent parameters, information about thermal modifications, and a summary of results from thermal tests of the entire system.

Strain distribution in thin concrete pavement panels under three-point loading to failure with pre-pulse-pump Brillouin optical time domain analysis (Presentation Video)

NASA Astrophysics Data System (ADS)

Bao, Yi; Cain, John; Chen, Yizheng; Huang, Ying; Chen, Genda; Palek, Leonard

2015-04-01

Thin concrete panels reinforced with alloy polymer macro-synthetic fibers have recently been introduced to rapidly and cost-effectively improve the driving condition of existing roadways by laying down a fabric sheet on the roadways, casting a thin layer of concrete, and then cutting the layer into panels. This study is aimed to understand the strain distribution and potential crack development of concrete panels under three-point loading. To this end, six full-size 6ft×6ft×3in concrete panels were tested to failure in the laboratory. They were instrumented with three types of single-mode optical fiber sensors whose performance and ability to measure the strain distribution and detect cracks were compared. Each optical fiber sensor was spliced and calibrated, and then attached to a fabric sheet using adhesive. A thin layer of mortar (0.25 ~ 0.5 in thick) was cast on the fabric sheet. The three types of distributed sensors were bare SM-28e+ fiber, SM-28e+ fiber with a tight buffer, and concrete crack cable, respectively. The concrete crack cable consisted of one SM-28e+ optical fiber with a tight buffer, one SM-28e+ optical fiber with a loose buffer for temperature compensation, and an outside protective tight sheath. Distributed strains were collected from the three optical fiber sensors with pre-pulse-pump Brillouin optical time domain analysis in room temperature. Among the three sensors, the bare fiber was observed to be most fragile during construction and operation, but most sensitive to strain change or micro-cracks. The concrete crack cable was most rugged, but not as sensitive to micro-cracks and robust in micro-crack measurement as the bare fiber. The ruggedness and sensitivity of the fiber with a tight buffer were in between the bare fiber and the concrete crack cable. The strain distribution resulted from the three optical sensors are in good agreement, and can be applied to successfully locate cracks in the concrete panels. It was observed that the three types of fibers were functional until the concrete panels have experienced inelastic deformation, making the distributed strain sensing technology promising for real applications in pavement engineering.

Nano-enabled paper humidity sensor for mobile based point-of-care lung function monitoring.

PubMed

Bhattacharjee, Mitradip; Nemade, Harshal B; Bandyopadhyay, Dipankar

2017-08-15

The frequency of breathing and peak flow rate of exhaled air are necessary parameters to detect chronic obstructive pulmonary diseases (COPDs) such as asthma, bronchitis, or pneumonia. We developed a lung function monitoring point-of-care-testing device (LFM-POCT) consisting of mouthpiece, paper-based humidity sensor, micro-heater, and real-time monitoring unit. Fabrication of a mouthpiece of optimal length ensured that the exhaled air was focused on the humidity-sensor. The resistive relative humidity sensor was developed using a filter paper coated with nanoparticles, which could easily follow the frequency and peak flow rate of the human breathing. Adsorption followed by condensation of the water molecules of the humid air on the paper-sensor during the forced exhalation reduced the electrical resistance of the sensor, which was converted to an electrical signal for sensing. A micro-heater composed of a copper-coil embedded in a polymer matrix helped in maintaining an optimal temperature on the sensor surface. Thus, water condensed on the sensor surface only during forcible breathing and the sensor recovered rapidly after the exhalation was complete by rapid desorption of water molecules from the sensor surface. Two types of real-time monitoring units were integrated into the device based on light emitting diodes (LEDs) and smart phones. The LED based unit displayed the diseased, critical, and fit conditions of the lungs by flashing LEDs of different colors. In comparison, for the mobile based monitoring unit, an application was developed employing an open source software, which established a wireless connectivity with the LFM-POCT device to perform the tests. Copyright © 2017 Elsevier B.V. All rights reserved.

Low-cost fabrication of optical waveguides, interconnects and sensing structures on all-polymer-based thin foils

NASA Astrophysics Data System (ADS)

Rezem, Maher; Kelb, Christian; Günther, Axel; Rahlves, Maik; Reithmeier, Eduard; Roth, Bernhard

2016-03-01

Micro-optical sensors based on optical waveguides are widely used to measure temperature, force and strain but also to detect biological and chemical substances such as explosives or toxins. While optical micro-sensors based on silicon technology require complex and expensive process technologies, a new generation of sensors based completely on polymers offer advantages especially in terms of low-cost and fast production techniques. We have developed a process to integrate micro-optical components such as embedded waveguides and optical interconnects into polymer foils with a thickness well below one millimeter. To enable high throughput production, we employ hot embossing technology, which is capable of reel-to-reel fabrication with a surface roughness in the optical range. For the waveguide fabrication, we used the thermoplastic polymethylmethacrylate (PMMA) as cladding and several optical adhesives as core materials. The waveguides are characterized with respect to refractive indices and propagation losses. We achieved propagation losses are as low as 0.3 dB/cm. Furthermore, we demonstrate coupling structures and their fabrication especially suited to integrate various light sources such as vertical-cavity surface-emitting lasers (VCSEL) and organic light emitting diodes (OLED) into thin polymer foils. Also, we present a concept of an all-polymer and waveguide based deformation sensor based on intensity modulation, which can be fabricated by utilizing our process. For future application, we aim at a low-cost and high-throughput reel-to-reel production process enabling the fabrication of large sensor arrays or disposable single-use sensing structures, which will open optical sensing to a large variety of application fields ranging from medical diagnosis to automotive sensing.

WGM Temperature Tracker

NASA Technical Reports Server (NTRS)

Strekalov, Dmitry V.

2012-01-01

This software implements digital control of a WGM (whispering-gallerymode) resonator temperature based on the dual-mode approach. It comprises one acquisition (dual-channel) and three control modules. The interaction of the proportional-integral loops is designed in the original way, preventing the loops from fighting. The data processing is organized in parallel with the acquisition, which allows the computational overhead time to be suppressed or often completely avoided. WGM resonators potentially provide excellent optical references for metrology, clocks, spectroscopy, and other applications. However, extremely accurate (below micro-Kelvin) temperature stabilization is required. This software allows one specifically advantageous method of such stabilization to be implemented, which is immune to a variety of effects that mask the temperature variation. WGM Temperature Tracker 2.3 (see figure) is a LabVIEW code developed for dual-mode temperature stabilization of WGM resonators. It has allowed for the temperature stabilization at the level of 200 nK with one-second integration time, and 6 nK with 10,000-second integration time, with the above room-temperature set point. This software, in conjunction with the appropriate hardware, can be used as a noncryogenic temperature sensor/ controller with sub-micro-Kelvin sensitivity, which at the time of this reporting considerably outperforms the state of the art.

Nocturnal Visual Orientation in Flying Insects: A Benchmark for the Design of Vision-Based Sensors in Micro-Aerial Vehicles

DTIC Science & Technology

2011-03-09

anu.edu.au Nocturnal visual orientation in flying insects: a benchmark for the design of vision-based sensors in Micro-Aerial Vehicles Report...9 10 Technical horizon sensors Over the past few years, a remarkable proliferation of designs for micro-aerial vehicles (MAVs) has occurred...possible elevations, it may severely degrade the performance of sensors by local saturation. Therefore it is necessary to find a method whereby the effect

Design and fabrication of a CMOS-compatible MHP gas sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Li, Ying; Yu, Jun, E-mail: junyu@dlut.edu.cn; Wu, Hao

2014-03-15

A novel micro-hotplate (MHP) gas sensor is designed and fabricated with a standard CMOS technology followed by post-CMOS processes. The tungsten plugging between the first and the second metal layer in the CMOS processes is designed as zigzag resistor heaters embedded in the membrane. In the post-CMOS processes, the membrane is released by front-side bulk silicon etching, and excellent adiabatic performance of the sensor is obtained. Pt/Ti electrode films are prepared on the MHP before the coating of the SnO{sub 2} film, which are promising to present better contact stability compared with Al electrodes. Measurements show that at room temperaturemore » in atmosphere, the device has a low power consumption of ∼19 mW and a rapid thermal response of 8 ms for heating up to 300 °C. The tungsten heater exhibits good high temperature stability with a slight fluctuation (<0.3%) in the resistance at an operation temperature of 300 °C under constant heating mode for 336 h, and a satisfactory temperature coefficient of resistance of about 1.9‰/°C.« less

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, Raoul; Tan, Weihong; Shi, Zhong-You

1994-01-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications.

Micro optical fiber light source and sensor and method of fabrication thereof

DOEpatents

Kopelman, R.; Tan, W.; Shi, Z.Y.

1994-11-01

This invention relates generally to the development of and a method of fabricating a micro optical fiber light source. An optical fiber micro-light source is presented whose aperture is extremely small yet able to act as an intense light source. Light sources of this type have wide ranging applications, including use as micro-sensors in NSOM. Micro-sensor light sources have excellent detection limits as well as photo stability, reversibility, and millisecond response times. Furthermore, a method for manufacturing a micro optical fiber light source is provided. It involves the photo-chemical attachment of an optically active material onto the end surface of an optical fiber cable which has been pulled to form an end with an extremely narrow aperture. More specifically, photopolymerization has been applied as a means to photo-chemically attach an optically active material. This process allows significant control of the size of the micro light source. Furthermore, photo-chemically attaching an optically active material enables the implementation of the micro-light source in a variety of sensor applications. 4 figs.

Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

PubMed Central

Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

2013-01-01

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm. PMID:24072022

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

PubMed Central

Liu, Mao-Chen; Dai, Ching-Liang; Chan, Chih-Hua; Wu, Chyan-Chyi

2009-01-01

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature. PMID:22399944

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique.

PubMed

Liu, Mao-Chen; Dai, Ching-Liang; Chan, Chih-Hua; Wu, Chyan-Chyi

2009-01-01

This study presents the fabrication of a polyaniline nanofiber ammonia sensor integrated with a readout circuit on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The micro ammonia sensor consists of a sensing resistor and an ammonia sensing film. Polyaniline prepared by a chemical polymerization method was adopted as the ammonia sensing film. The fabrication of the ammonia sensor needs a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the ammonia sensing film is coated on the sensing resistor. The ammonia sensor, which is of resistive type, changes its resistance when the sensing film adsorbs or desorbs ammonia gas. A readout circuit is employed to convert the resistance of the ammonia sensor into the voltage output. Experimental results show that the sensitivity of the ammonia sensor is about 0.88 mV/ppm at room temperature.

Micro ethanol sensors with a heater fabricated using the commercial 0.18 μm CMOS process.

PubMed

Liao, Wei-Zhen; Dai, Ching-Liang; Yang, Ming-Zhi

2013-09-25

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 µm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.

Novel Fabry-Perot fiber optic sensor with multiple applications

NASA Astrophysics Data System (ADS)

Chen, Xiaopei; Shen, Fabin; Wang, Anbo; Wang, Zhuang; Zhang, Yan

2004-12-01

A novel Intrinsic Fabry-Perot fiber-optic sensor is presented in this paper. The sensors were made through two simple steps: wet chemical etch and fusion splice. Micro air-gaps were generated inside the fibers and functioned as reflective mirrors. This procedure not only provides a simple and cost effective technology for fabricating intrinsic Fabry-Perot Interferometric (IFPI) fiber sensors, but also provides two possible IFPI structures. Both of the fiber cavity between the air-gaps or the air-gap and cleaved fiber end can be used as sensing elements. With these two structures, this sensor can be used to measure the temperature, strain, pressure, refractive index of chemicals and the thin film thickness by itself. Multi-point measurements can also be achieved by multiplexing. Furthermore, it also can be multiplexed with other sensors such as Long Period Gratings (LPG) to provide compensations for other perturbation sensing. Theoretical and experimental studies of two sensor structures are described. Experimental results show that high resolution and high sensitivity can be obtained with appropriate signal processing.

Performance of an untethered micro-optical pressure sensor

NASA Astrophysics Data System (ADS)

Ioppolo, Tindaro; Manzo, Maurizio; Krueger, Paul

2012-11-01

We present analytical and computational studies of the performance of a novel untethered micro-optical pressure sensor for fluid dynamics measurements. In particular, resolution and dynamic range will be presented. The sensor concept is based on the whispering galley mode (WGM) shifts that are observed in micro-scale dielectric optical cavities. A micro-spherical optical cavity (liquid or solid) is embedded in a thin polymeric sheet. The applied external pressure perturbs the morphology of the optical cavity leading to a shift in its optical resonances. The optical sensors are interrogated remotely, by embedding quantum dots or fluorescent dye in the micro-optical cavity. This allows a free space coupling of excitation and monitoring of the optical modes without the need of optical fibers or other cabling. With appropriate excitation and monitoring equipment, the micro-scale sensors can be distributed over a surface (e.g., including flexible biological surfaces) to monitor the local pressure field. We acknowledge the financial support from the National Science Foundation through grant CBET-1133876 with Dr. Horst Henning Winter as the program director.

High-precision micro-displacement optical-fiber sensor based on surface plasmon resonance.

PubMed

Zhu, Zongda; Liu, Lu; Liu, Zhihai; Zhang, Yu; Zhang, Yaxun

2017-05-15

We propose and demonstrate a novel optical-fiber micro-displacement sensor based on surface plasmon resonance (SPR) by fabricating a Kretschmann configuration on graded-index multimode fiber (GIMMF). We employ a single-mode fiber to change the radial position of the incident beam as the displacement. In the GIMMF, the angle between the light beam and fiber axis, which is closely related to the resonance angle, is changed by the displacement; thus, the resonance wavelength of the fiber SPR shifts. This micro-displacement fiber sensor has a wide detection range of 0-25 μm, a high sensitivity with maximum up to 10.32 nm/μm, and a nanometer resolution with minimum to 2 nm, which transcends almost all of other optical-fiber micro-displacement sensors. In addition, we also research that increasing the fiber polishing angle or medium refractive index can improve the sensitivity. This micro-displacement sensor will have a great significance in many industrial applications and provide a neoteric, rapid, and accurate optical measurement method in micro-displacement.

Direct laser writing of polymer micro-ring resonator ultrasonic sensors

NASA Astrophysics Data System (ADS)

Wei, Heming; Krishnaswamy, Sridhar

2017-04-01

With the development of photoacoustic technology in recent years, ultrasound-related sensors play a vital role in a number of areas ranging from scientific research to nondestructive testing. Compared with the traditional PZT transducer as ultrasonic sensors, novel ultrasonic sensors based on optical methods such as micro-ring resonators have gained increasing attention. The total internal reflection of the light along the cavity results in light propagating in microcavities as whispering gallery modes (WGMs), which are extremely sensitive to change in the radius and refractive index of the cavity induced by ultrasound strain field. In this work, we present a polymer optical micro-ring resonator based ultrasonic sensor fabricated by direct laser writing optical lithography. The design consists of a single micro-ring and a straight tapered waveguide that can be directly coupled by single mode fibers (SMFs). The design and fabrication of the printed polymer resonator have been optimized to provide broad bandwidth and high optical quality factor to ensure high detection sensitivity. The experiments demonstrate the potential of the polymer micro-ring resonator to works as a high-performance ultrasonic sensor.

Micro-ring sensor used in the diagnosis of gastric cancer

NASA Astrophysics Data System (ADS)

Shi, Sichao; Cheng, Qing; Lin, Rong; Su, Da; Huang, Ying

2016-01-01

To find a detecting method that can be applied to the clinical screening and diagnosis, the cascaded micro-ring sensor with Vernier effect was used to distinguish gastric cancerous and normal cells. The simulation by FDTD of the cascaded microring sensor with different refractive indexes of the analyte (normal cells and gastric cancer cells) will be presented. In the simulation, with the refractive index's change Δn=0.02 for the two different analyte, the shift of sensor's resonant wavelength is 6.71nm. And the cascaded micro-ring sensor's sensitivity S is 335.5nm/RIU, and it is much larger compared to 19nm/RIU for a single ring sensor.

[Wireless Passive Body Sensor for Temperature Monitoring Using Near Field Communication Technology].

PubMed

Shi, Bo; Zhang, Li; Zhang, Genxuan; Tsau, Young; Zhang, Sai; Li, Lei

2017-01-01

In this study, we designed a wireless body temperature sensor (WBTS) based on near field communication (NFC) technology. Just attaching the WBTS to a mobile phone with NFC function, the real-time body temperature of human subjects can be acquired by an application program without seperate power supply. The WBTS is mainly composed of a digital body temperature probe (d-BTP), a NFC unit and an antenna. The d-BTP acquires and processes body temperature data through a micro control er, and the NFC unit and antenna are used for wireless energy transmission and data communication between the mobile phone and WBTS. UART communication protocol is used in the communication between the d-BTP and NFC unit, and data compression technique is adopted for improving transmission efficiency and decreasing power loss. In tests, the error of WBTS is ±0.1 oC, in range of 32 oC to 42 oC. The WBTS has advantages of high accuracy, low power loss, strong anti-interference ability, dispensation with independent power supply etc., and it can be integrated into wearable apparatuses for temperature monitoring and health management.

A Micro-Preconcentrator Combined Olfactory Sensing System with a Micromechanical Cantilever Sensor for Detecting 2,4-Dinitrotoluene Gas Vapor

PubMed Central

Chae, Myung-Sic; Kim, Jinsik; Yoo, Yong Kyoung; Kang, Ji Yoon; Lee, Jeong Hoon; Hwang, Kyo Seon

2015-01-01

Preventing unexpected explosive attacks and tracing explosion-related molecules require the development of highly sensitive gas-vapor detection systems. For that purpose, a micromechanical cantilever-based olfactory sensing system including a sample preconcentrator was developed to detect 2,4-dinitrotoluene (2,4-DNT), which is a well-known by-product of the explosive molecule trinitrotoluene (TNT) and exists in concentrations on the order of parts per billion in the atmosphere at room temperature. A peptide receptor (His-Pro-Asn-Phe-Ser-Lys-Tyr-Ile-Leu-His-Gln-Arg) that has high binding affinity for 2,4-DNT was immobilized on the surface of the cantilever sensors to detect 2,4-DNT vapor for highly selective detection. A micro-preconcentrator (µPC) was developed using Tenax-TA adsorbent to produce higher concentrations of 2,4-DNT molecules. The preconcentration was achieved via adsorption and thermal desorption phenomena occurring between target molecules and the adsorbent. The µPC directly integrated with a cantilever sensor and enhanced the sensitivity of the cantilever sensor as a pretreatment tool for the target vapor. The response was rapidly saturated within 5 min and sustained for more than 10 min when the concentrated vapor was introduced. By calculating preconcentration factor values, we verified that the cantilever sensor provides up to an eightfold improvement in sensing performance. PMID:26213944

Micro-optics technology and sensor systems applications

NASA Technical Reports Server (NTRS)

Gal, George; Herman, B.; Anderson, W.; Whitney, R.; Morrow, H.

1993-01-01

The current generation of electro-optical sensors utilizing refractive and reflective optical elements require sophisticated, complex, and expensive designs. Advanced-technology-based electro-optical sensors of minimum size and weight require miniaturization of optical, electrical, and mechanical devices with an increasing trend toward integration of various components. Micro-optics technology has the potential in a number of areas to simplify optical design with improved performance. This includes internally cooled apertures, hybrid optical design, microlenses, dispersive multicolor microlenses, active dither, electronically controlled optical beam steer, and microscopic integration of micro-optics, detectors, and signal processing layers. This paper describes our approach to the development of micro-optics technology with our main emphasis for sensors applications.

MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module

PubMed Central

Pandya, H. J.; Kim, Hyun Tae; Roy, Rajarshi; Desai, Jaydev P.

2014-01-01

In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF magnetron sputtering technique. The films were deposited in Argon (Ar) ambient without external substrate heating. The material characteristics of the sputtered deposited silicon film and silicon film annealed at different temperatures (400–1050°C) were studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The residual stress of the films was measured as a function of annealing temperature. The stress of the as-deposited films was observed to be compressive and annealing the film above 1050°C resulted in a tensile stress. The stress of the film decreased gradually with increase in annealing temperature. The fabricated cantilevers were 130 µm in length, 40 µm wide and 1.0 µm thick. A series of force-displacement curves were obtained using fabricated microcantilever with commercial AFM setup and the data were analyzed to get the spring constant and the sensitivity of the fabricated microcantilever. The measured spring constant and sensitivity of the sensor was 0.1488N/m and 2.7mV/N. The microcantilever force sensor was integrated with an electronic module that detects the change in resistance of the sensor with respect to the applied force and displays it on the computer screen. PMID:24855449

MEMS based Low Cost Piezoresistive Microcantilever Force Sensor and Sensor Module.

PubMed

Pandya, H J; Kim, Hyun Tae; Roy, Rajarshi; Desai, Jaydev P

2014-03-01

In the present work, we report fabrication and characterization of a low-cost MEMS based piezoresistive micro-force sensor with SU-8 tip using laboratory made silicon-on-insulator (SOI) substrate. To prepare SOI wafer, silicon film (0.8 µm thick) was deposited on an oxidized silicon wafer using RF magnetron sputtering technique. The films were deposited in Argon (Ar) ambient without external substrate heating. The material characteristics of the sputtered deposited silicon film and silicon film annealed at different temperatures (400-1050°C) were studied using atomic force microscopy (AFM) and X-ray diffraction (XRD) techniques. The residual stress of the films was measured as a function of annealing temperature. The stress of the as-deposited films was observed to be compressive and annealing the film above 1050°C resulted in a tensile stress. The stress of the film decreased gradually with increase in annealing temperature. The fabricated cantilevers were 130 µm in length, 40 µm wide and 1.0 µm thick. A series of force-displacement curves were obtained using fabricated microcantilever with commercial AFM setup and the data were analyzed to get the spring constant and the sensitivity of the fabricated microcantilever. The measured spring constant and sensitivity of the sensor was 0.1488N/m and 2.7mV/N. The microcantilever force sensor was integrated with an electronic module that detects the change in resistance of the sensor with respect to the applied force and displays it on the computer screen.

Development of chipscale chalcogenide glass based infrared chemical sensors

NASA Astrophysics Data System (ADS)

Hu, Juejun; Musgraves, J. David; Carlie, Nathan; Zdyrko, Bogdan; Luzinov, Igor; Agarwal, Anu; Richardson, Kathleen; Kimerling, Lionel

2011-01-01

In this paper, we review the design, processing, and characterization of novel planar infrared chemical sensors. Chalcogenide glasses are identified as the material of choice for sensing given their wide infrared transparency as well as almost unlimited capacity for composition alloying and property tailoring. Three generations of on-chip spectroscopic chemical sensor devices we have developed: waveguide evanescent sensors, micro-disk cavity-enhanced sensors and micro-cavity photothermal sensors are discussed.

Flexible Wing Base Micro Aerial Vehicles: Micro Air Vehicles (MAVs) for Surveillance and Remote Sensor Delivery

NASA Technical Reports Server (NTRS)

Ifju, Peter

2002-01-01

Micro Air Vehicles (MAVs) will be developed for tracking individuals, locating terrorist threats, and delivering remote sensors, for surveillance and chemical/biological agent detection. The tasks are: (1) Develop robust MAV platform capable of carrying sensor payload. (2) Develop fully autonomous capabilities for delivery of sensors to remote and distant locations. The current capabilities and accomplishments are: (1) Operational electric (inaudible) 6-inch MAVs with novel flexible wing, providing superior aerodynamic efficiency and control. (2) Vision-based flight stability and control (from on-board cameras).

Mask-less deposition of Au-SnO2 nanocomposites on CMOS MEMS platform for ethanol detection.

PubMed

Santra, S; Sinha, A K; De Luca, A; Ali, S Z; Udrea, F; Guha, P K; Ray, S K; Gardner, J W

2016-03-29

Here we report on the mask-less deposition of Au-SnO2 nanocomposites with a silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) platform through the use of dip pen nanolithography (DPN) to create a low-cost ethanol sensor. MEMS technology is used in order to achieve low power consumption, by the employment of a membrane structure formed using deep reactive ion etching technique. The device consists of an embedded tungsten micro-heater with gold interdigitated electrodes on top of the SOI membrane. The tungsten micro-heater is used to raise the membrane temperature up to its operating temperature and the electrodes are used to measure the resistance of the nanocomposite sensing layer. The CMOS MEMS devices have high electro-thermal efficiency, with 8.2 °C temperature increase per mW power of consumption. The sensing material (Au-SnO2 nanocomposite) was synthesised starting from SnO nanoplates, then Au nanoparticles were attached chemically to the surface of SnO nanoplates, finally the mixture was heated at 700 °C in an oven in air for 4 h. This composite material was sonicated for 2 h in terpineol to make a viscous homogeneous slurry and then 'written' directly across the electrode area using the DPN technique without any mask. The devices were characterised by exposure to ethanol vapour in humid air in the concentration range of 100-1000 ppm. The sensitivity varied from 1.2 to 0.27 ppm(-1) for 100-1000 ppm of ethanol at 10% relative humid air. Selectivity measurements showed that the sensors were selective towards ethanol when they were exposed to acetone and toluene.

Mask-less deposition of Au-SnO2 nanocomposites on CMOS MEMS platform for ethanol detection

NASA Astrophysics Data System (ADS)

Santra, S.; Sinha, A. K.; De Luca, A.; Ali, S. Z.; Udrea, F.; Guha, P. K.; Ray, S. K.; Gardner, J. W.

2016-03-01

Here we report on the mask-less deposition of Au-SnO2 nanocomposites with a silicon-on-insulator (SOI) complementary metal oxide semiconductor (CMOS) micro electro mechanical system (MEMS) platform through the use of dip pen nanolithography (DPN) to create a low-cost ethanol sensor. MEMS technology is used in order to achieve low power consumption, by the employment of a membrane structure formed using deep reactive ion etching technique. The device consists of an embedded tungsten micro-heater with gold interdigitated electrodes on top of the SOI membrane. The tungsten micro-heater is used to raise the membrane temperature up to its operating temperature and the electrodes are used to measure the resistance of the nanocomposite sensing layer. The CMOS MEMS devices have high electro-thermal efficiency, with 8.2 °C temperature increase per mW power of consumption. The sensing material (Au-SnO2 nanocomposite) was synthesised starting from SnO nanoplates, then Au nanoparticles were attached chemically to the surface of SnO nanoplates, finally the mixture was heated at 700 °C in an oven in air for 4 h. This composite material was sonicated for 2 h in terpineol to make a viscous homogeneous slurry and then ‘written’ directly across the electrode area using the DPN technique without any mask. The devices were characterised by exposure to ethanol vapour in humid air in the concentration range of 100-1000 ppm. The sensitivity varied from 1.2 to 0.27 ppm-1 for 100-1000 ppm of ethanol at 10% relative humid air. Selectivity measurements showed that the sensors were selective towards ethanol when they were exposed to acetone and toluene.

Lockheed Martin microcryocoolers

NASA Astrophysics Data System (ADS)

Olson, Jeffrey R.; Roth, Eric W.; Sanders, Lincoln-Shaun; Will, Eric; Frank, David J.

2017-05-01

Lockheed Martin's Advanced Technology Center, part of Lockheed Martin Space Systems Company, has developed a series of long life microcryocoolers for avionics and space sensor applications. We report the development and testing of three varieties of single-stage, compact, coaxial, pulse tube microcryocoolers. These coolers support emerging large, high operating temperature (100-150K) infrared focal plane array sensors with nominal cooling loads of 200-2000 mW, and all share long life technology attributes used in space cryocoolers, which typically provide 10 years of continuous operation on orbit without degradation. These three models of microcryocooler are the 345 gram Micro1-1, designed to provide 1 W cooling at 150 K, the 450 gram Micro1-2, designed to provide 2 W cooling at 105 K, and the 320 gram Micro1-3, designed to provide 300 mW cooling at 125 K while providing the capability to cool the IR focal plane to 125 K in less than 3 minutes. The Micro1-3 was also designed with a highly compact package that reduced the coldhead length to 55 mm, a length reduction of more than a factor of two compared with the other coldheads. This paper also describes recent design studies of 2-stage microcryocoolers capable of providing cooling at 25-100K. LMSSC is an industry leader in multiple-stage coolers, having successfully built and tested eight 2-stage coolers (typically cooling to 35-55K), and four coolers with 3 or 4 stages (for cooling to 4-10K). The 2-stage microcryocooler offers a very low mass and compact package capable of cooling HgCdTe focal planes, while providing simultaneous optics cooling at a higher temperature.

Groove micro-structure optical fiber refractive index sensor with nanoscale gold film based on surface plasmon resonance

NASA Astrophysics Data System (ADS)

Zhang, Zhen; Li, Shuguang; Liu, Qiang; Feng, Xinxing; Zhang, Shuhuan; Wang, Yujun; Wu, Junjun

2018-07-01

A groove micro-structure optical fiber refractive index sensor with nanoscale gold film based on surface plasmon resonance (SPR) is proposed and analyzed by the finite element method (FEM). Numerical results show that the average sensitivity is 15,933 nm/refractive index unit (RIU) with the refractive index of analyte ranging from 1.40 to 1.43 and the maximum sensitivity is 28,600 nm/RIU and the resolution of the sensor is 3.50 × 10-8 RIU. The groove micro-structure optical fiber refractive index sensor do some changes on the D-shaped fiber sensor, compared with conventional D-shaped fiber sensor, it has a higher sensitivity and it is easier to produce than the traditional SPR sensor.

Pressure sensing of Fabry-Perot interferometer with a microchannel demodulated by a FBG

NASA Astrophysics Data System (ADS)

Yu, Yongqin; Chen, Xue; Huang, Quandong; Du, Chenlin; Ruan, Shuangchen

2015-07-01

A novel and compact fiber-probe pressure sensor was demonstrated based on micro Fabry-Perot interferometer (FPI). The device was fabricated by splicing both ends of a short section simplified hollow-core photonic crystal fiber (SHCPCF) with single mode fibers (SMFs), and then a micro channel was drilled by femtosecond laser micromachining in the SHC-PCF to significantly enhance the pressure sensitivity. The pressure sensing characteristics based on micro-FPI have been investigated by measuring the signals through the demodulation of phase since the external signal imposing on the interferometer will induce the phase change of interference signal. Then a FBG was cascaded to demodulate the signal. A micro FPI demonstrates a maximum pressure sensitivity of 32 dB/MPa, while a low temperature cross-sensitivity of 0.27 KPa/°C. Hence it may have potential for pressure applications in harsh environment.

Thermal Hysteresis of MEMS Packaged Capacitive Pressure Sensor (CPS) Based 3C-SiC

NASA Astrophysics Data System (ADS)

Marsi, N.; Majlis, B. Y.; Mohd-Yasin, F.; Hamzah, A. A.; Mohd Rus, A. Z.

2016-11-01

Presented herein are the effects of thermal hysteresis analyses of the MEMS packaged capacitive pressure sensor (CPS). The MEMS CPS was employed on Si-on-3C-SiC wafer that was performed using the hot wall low-pressure chemical vapour deposition (LPCVD) reactors at the Queensland Micro and Nanotechnology Center (QMNC), Griffith University and fabricated using the bulk-micromachining process. The MEMS CPS was operated at an extreme temperature up to 500°C and high external pressure at 5.0 MPa. The thermal hysteresis phenomenon that causes the deflection, strain and stress on the 3C-SiC diaphragm spontaneously influence the MEMS CPS performances. The differences of temperature, hysteresis, and repeatability test were presented to demonstrate the functionality of the MEMS packaged CPS. As expected, the output hysteresis has a low hysteresis (less than 0.05%) which has the hardness greater than the traditional silicon. By utilizing this low hysteresis, it was revealed that the MEMS packaged CPS has high repeatability and stability of the sensor.

A Study of Thermistor Performance within a Textile Structure.

PubMed

Hughes-Riley, Theodore; Lugoda, Pasindu; Dias, Tilak; Trabi, Christophe L; Morris, Robert H

2017-08-05

Textiles provide an ideal structure for embedding sensors for medical devices. Skin temperature measurement is one area in which a sensor textile could be particularly beneficial; pathological skin is normally very sensitive, making the comfort of anything placed on that skin paramount. Skin temperature is an important parameter to measure for a number of medical applications, including for the early detection of diabetic foot ulcer formation. To this end an electronic temperature-sensor yarn was developed by embedding a commercially available thermistor chip into the fibres of a yarn, which can be used to produce a textile or a garment. As part of this process a resin was used to encapsulate the thermistor. This protects the thermistor from mechanical and chemical stresses, and also allows the sensing yarn to be washed. Building off preliminary work, the behaviour and performance of an encapsulated thermistor has been characterised to determine the effect of encapsulation on the step response time and absolute temperature measurements. Over the temperature range of interest only a minimal effect was observed, with step response times varying between 0.01-0.35 s. A general solution is presented for the heat transfer coefficient compared to size of the micro-pod formed by the encapsulation of the thermistor. Finally, a prototype temperature-sensing sock was produced using a network of sensing yarns as a demonstrator of a system that could warn of impending ulcer formation in diabetic patients.

Fabrication and surface-modification of implantable microprobes for neuroscience studies

NASA Astrophysics Data System (ADS)

Cao, H.; Nguyen, C. M.; Chiao, J. C.

2012-06-01

In this work implantable micro-probes for central nervous system (CNS) studies were developed on silicon and polyimide substrates. The probes which contained micro-electrode arrays with different surface modifications were designed for implantation in the CNS. The electrode surfaces were modified with nano-scale structures that could greatly increase the active surface area in order to enhance the electrochemical current outputs while maintaining micro-scale dimensions of the electrodes and probes. The electrodes were made of gold or platinum, and designed with different sizes. The silicon probes were modified by silicon nanowires fabricated with the vapor-liquid-solid mechanism at high temperatures. With polyimide substrates, the nanostructure modification was carried out by applying concentrated gold or silver colloid solutions onto the micro-electrodes at room temperature. The surfaces of electrodes before and after modification were observed by scanning electron microscopy. The silicon nanowire-modified surface was characterized by cyclic voltammetry. Experiments were carried out to investigate the improvement in sensing performance. The modified electrodes were tested with H2O2, electrochemical L-glutamate and dopamine. Comparisons between electrodes with and without nanostructure modification were conducted showing that the modifications have enhanced the signal outputs of the electrochemical neurotransmitter sensors.

NEET Micro-Pocket Fission Detector. Final Project report

DOE Office of Scientific and Technical Information (OSTI.GOV)

Unruh, T.; Rempe, Joy; McGregor, Douglas

2014-09-01

A collaboration between the Idaho National Laboratory (INL), the Kansas State University (KSU), and the French Alternative Energies and Atomic Energy Commission, Commissariat à l'Énergie Atomique et aux Energies Alternatives, (CEA), is funded by the Nuclear Energy Enabling Technologies (NEET) program to develop and test Micro-Pocket Fission Detectors (MPFDs), which are compact fission chambers capable of simultaneously measuring thermal neutron flux, fast neutron flux and temperature within a single package. When deployed, these sensors will significantly advance flux detection capabilities for irradiation tests in US Material Test Reactors (MTRs). Ultimately, evaluations may lead to a more compact, more accurate, andmore » longer lifetime flux sensor for critical mock-ups, and high performance reactors, allowing several Department of Energy Office of Nuclear Energy (DOE-NE) programs to obtain higher accuracy/higher resolution data from irradiation tests of candidate new fuels and materials. Specifically, deployment of MPFDs will address several challenges faced in irradiations performed at MTRs: Current fission chamber technologies do not offer the ability to measure fast flux, thermal flux and temperature within a single compact probe; MPFDs offer this option. MPFD construction is very different than current fission chamber construction; the use of high temperature materials allow MPFDs to be specifically tailored to survive harsh conditions encountered in-core of high performance MTRs. The higher accuracy, high fidelity data available from the compact MPFD will significantly enhance efforts to validate new high-fidelity reactor physics codes and new multi-scale, multi-physics codes. MPFDs can be built with variable sensitivities to survive the lifetime of an experiment or fuel assembly in some MTRs, allowing for more efficient and cost effective power monitoring. The small size of the MPFDs allows multiple sensors to be deployed, offering the potential to accurately measure the flux and temperature profiles in the reactor. This report summarizes the status at the end of year two of this three year project. As documented in this report, all planned accomplishments for developing this unique new, compact, multipurpose sensor have been completed.« less

Micro-patterning and characterization of PHEMA-co-PAM-based optical chemical sensors for lab-on-a-chip applications.

PubMed

Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R; Meldrum, Deirdre R

2012-10-01

We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O(2)) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes.

Manufacture of high aspect ratio micro-pillar wall shear stress sensor arrays

NASA Astrophysics Data System (ADS)

Gnanamanickam, Ebenezer P.; Sullivan, John P.

2012-12-01

In the field of experimental fluid mechanics the measurement of unsteady, distributed wall shear stress has proved historically challenging. Recently, sensors based on an array of flexible micro-pillars have shown promise in carrying out such measurements. Similar sensors find use in other applications such as cellular mechanics. This work presents a manufacturing technique that can manufacture micro-pillar arrays of high aspect ratio. An electric discharge machine (EDM) is used to manufacture a micro-drilling tool. This micro-drilling tool is used to form holes in a wax sheet which acts as the mold for the micro-pillar array. Silicone rubber is cast in these molds to yield a micro-pillar array. Using this technique, micro-pillar arrays with a maximum aspect ratio of about 10 have been manufactured. Manufacturing issues encountered, steps to alleviate them and the potential of the process to manufacture similar micro-pillar arrays in a time-efficient manner are also discussed.

Recent Trends in Monitoring of European Water Framework Directive Priority Substances Using Micro-Sensors: A 2007–2009 Review

PubMed Central

Namour, Philippe; Lepot, Mathieu; Jaffrezic-Renault, Nicole

2010-01-01

This review discusses from a critical perspective the development of new sensors for the measurement of priority pollutants targeted in the E.U. Water Framework Directive. Significant advances are reported in the paper and their advantages and limitations are also discussed. Future perspectives in this area are also pointed out in the conclusions. This review covers publications appeared since December 2006 (the publication date of the Swift report). Among priority substances, sensors for monitoring the four WFD metals represent 81% of published papers. None of analyzed publications present a micro-sensor totally validated in laboratory, ready for tests under real conditions in the field. The researches are mainly focused on the sensing part of the micro-sensors. Nevertheless, the main factor limiting micro-sensor applications in the environment is the ruggedness of the receptor towards environmental conditions. This point constitutes the first technological obstacle to be overcome for any long-term field tests. PMID:22163635

Fabrication of 3D electro-thermal micro actuators in silica glass by femtosecond laser wet etch and microsolidics

NASA Astrophysics Data System (ADS)

Li, Qichao; Shan, Chao; Yang, Qing; Chen, Feng; Bian, Hao; Hou, Xun

2017-02-01

This paper demonstrates a novel electro-thermal micro actuator's design, fabrication and device tests which combine microfluidic technology and microsolidics process. A three-dimensional solenoid microchannel with high aspect ratio is fabricated inside the silica glass by an improved femtosecond laser wet etch (FLWE) technology, and the diameter of the spiral coil is only 200 μm. Molten alloy (Bi/In/Sn/Pb) with high melting point is injected into the three-dimensional solenoid microchannel inside the silica glass , then it solidifys and forms an electro-thermal micro actuator. The device is capable of achieving precise temperature control and quick response, and can also be easily integrated into MEMS, sensors and `lab on a chip' (LOC) platform inside the fused silica substrate.

Design and fabrication of a differential scanning nanocalorimeter

NASA Astrophysics Data System (ADS)

Zuo, Lei; Chen, Xiaoming; Yu, Shifeng; Lu, Ming

2017-02-01

This paper describes the design, fabrication, and characterization of a differential scanning nanocalorimeter that significantly reduces the sample volume to microliters and can potentially improve the temperature sensitivity to 10 µK. The nanocalorimeter consists of a polymeric freestanding membrane, four high-sensitive low-noise thermistors based on silicon carbide (SiC), and a platinum heater and temperature sensor. With the integrated heater and sensors, temperature scanning and power compensation can be achieved for calorimetric measurement. Temperature sensing SiC film was prepared by using sintered SiC target and DC magnetron sputtering under different gas pressures and sputtering power. The SiC sensing material is characterized through the measurement of current-voltage curves and noise levels. The thermal performance of a fabricated nanocalorimeter is studied in simulation and experiment. The experiment results show the device has excellent thermal isolation to hold thermal energy. The noise test together with the simulation show the device is promising for micro 10 µK temperature sensitivity and nanowatt resolution which will lead to low-volume ultra-sensitive nanocalorimetry for biological processes, such as protein folding and ligand binding.

All-fiber pyroelectric nanogenerator

NASA Astrophysics Data System (ADS)

Ghosh, Sujoy Kumar; Xie, Mengying; Bowen, Christopher Rhys; Mandal, Dipankar

2018-04-01

An all-fiber pyroelectric nanogenerator (PyNG) is fabricated where both the active pyroelectric component and the electrodes were composed of fiber. The pyroelectric component was made with randomly organized electrospun PVDF nano-fibers possessing ferroelectric β- and γ-phases. The PyNG possess higher level of sensitivity which can detect very low level of temperature fluctuation, as, low as, 2 K. In addition, the thermal energy harvesting ability of the PyNG under several temperature variations and cycling frequencies paves the way for next generation thermal sensor and self-powered flexible micro-electronics.

Optical fiber Fabry-Perot interferometer cavity fabricated by femtosecond laser micromachining and fusion splicing for refractive index sensing.

PubMed

Liao, C R; Hu, T Y; Wang, D N

2012-09-24

We demonstrate a fiber in-line Fabry-Perot interferometer cavity sensor for refractive index measurement. The interferometer cavity is formed by drilling a micro-hole at the cleaved fiber end facet, followed by fusion splicing. A micro-channel is inscribed by femtosecond laser micromachining to vertically cross the cavity to allow liquid to flow in. The refractive index sensitivity obtained is ~994 nm/RIU (refractive index unit). Such a device is simple in configuration, easy for fabrication and reliable in operation due to extremely low temperature cross sensitivity of ~4.8 × 10(-6) RIU/°C.

VIS-NIR multispectral synchronous imaging pyrometer for high-temperature measurements.

PubMed

Fu, Tairan; Liu, Jiangfan; Tian, Jibin

2017-06-01

A visible-infrared multispectral synchronous imaging pyrometer was developed for simultaneous, multispectral, two-dimensional high temperature measurements. The multispectral image pyrometer uses prism separation construction in the spectrum range of 650-950 nm and multi-sensor fusion of three CCD sensors for high-temperature measurements. The pyrometer had 650-750 nm, 750-850 nm, and 850-950 nm channels all with the same optical path. The wavelength choice for each channel is flexible with three center wavelengths (700 nm, 810 nm, and 920 nm) with a full width at half maximum of the spectrum of 3 nm used here. The three image sensors were precisely aligned to avoid spectrum artifacts by micro-mechanical adjustments of the sensors relative to each other to position them within a quarter pixel of each other. The pyrometer was calibrated with the standard blackbody source, and the temperature measurement uncertainty was within 0.21 °C-0.99 °C in the temperatures of 600 °C-1800 °C for the blackbody measurements. The pyrometer was then used to measure the leading edge temperatures of a ceramics model exposed to high-enthalpy plasma aerodynamic heating environment to verify the system applicability. The measured temperature ranges are 701-991 °C, 701-1134 °C, and 701-834 °C at the heating transient, steady state, and cooling transient times. A significant temperature gradient (170 °C/mm) was observed away from the leading edge facing the plasma jet during the steady state heating time. The temperature non-uniformity on the surface occurs during the entire aerodynamic heating process. However, the temperature distribution becomes more uniform after the heater is shut down and the experimental model is naturally cooled. This result shows that the multispectral simultaneous image measurement mode provides a wider temperature range for one imaging measurement of high spatial temperature gradients in transient applications.

Electron beam physical vapor deposition of thin ruby films for remote temperature sensing

NASA Astrophysics Data System (ADS)

Li, Wei; Coppens, Zachary J.; Greg Walker, D.; Valentine, Jason G.

2013-04-01

Thermographic phosphors (TGPs) possessing temperature-dependent photoluminescence properties have a wide range of uses in thermometry due to their remote access and large temperature sensitivity range. However, in most cases, phosphors are synthesized in powder form, which prevents their use in high resolution micro and nanoscale thermal microscopy. In the present study, we investigate the use of electron beam physical vapor deposition to fabricate thin films of chromium-doped aluminum oxide (Cr-Al2O3, ruby) thermographic phosphors. Although as-deposited films were amorphous and exhibited weak photoluminescence, the films regained the stoichiometry and α-Al2O3 crystal structure of the combustion synthesized source powder after thermal annealing. As a consequence, the annealed films exhibit both strong photoluminescence and a temperature-dependent lifetime that decreases from 2.9 ms at 298 K to 2.1 ms at 370 K. Ruby films were also deposited on multiple substrates. To ensure a continuous film with smooth surface morphology and strong photoluminescence, we use a sapphire substrate, which is thermal expansion coefficient and lattice matched to the film. These thin ruby films can potentially be used as remote temperature sensors for probing the local temperatures of micro and nanoscale structures.

A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

PubMed Central

Liu, Huan; Yang, Shuming; Zhao, Yulong; Jiang, Zhuangde; Liu, Yan; Tian, Bian

2013-01-01

Presented here is a slotted-quad-beam structure sensor for the measurement of friction in micro bearings. Stress concentration slots are incorporated into a conventional quad-beam structure to improve the sensitivity of force measurements. The performance comparison between the quad-beam structure sensor and the slotted-quad-beam structure sensor are performed by theoretical modeling and finite element (FE) analysis. A hollow stainless steel probe is attached to the mesa of the sensor chip by a tailor-made organic glass fixture. Concerning the overload protection of the fragile beams, a glass wafer is bonded onto the bottom of sensor chip to limit the displacement of the mesa. The calibration of the packaged device is experimentally performed by a tri-dimensional positioning stage, a precision piezoelectric ceramic and an electronic analytical balance, which indicates its favorable sensitivity and overload protection. To verify the potential of the proposed sensor being applied in micro friction measurement, a measurement platform is established. The output of the sensor reflects the friction of bearing resulting from dry friction and solid lubrication. The results accord with the theoretical modeling and demonstrate that the sensor has the potential application in measuring the micro friction force under stable stage in MEMS machines. PMID:24084112

An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics Platform.

PubMed

Tao, Jifang; Luo, Yu; Wang, Li; Cai, Hong; Sun, Tao; Song, Junfeng; Liu, Hui; Gu, Yuandong

2016-07-15

The dew point is the temperature at which vapour begins to condense out of the gaseous phase. The deterministic relationship between the dew point and humidity is the basis for the industry-standard "chilled-mirror" dew point hygrometers used for highly accurate humidity measurements, which are essential for a broad range of industrial and metrological applications. However, these instruments have several limitations, such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew point sensor (DPS) that features high accuracy, a small footprint, and fast response. The fundamental component of this DPS is a partially exposed photonic micro-ring resonator, which serves two functions simultaneously: 1) sensing the condensed water droplets via evanescent fields and 2) functioning as a highly accurate, in situ temperature sensor based on the thermo-optic effect (TOE). This device virtually eliminates most of the temperature-related errors that affect conventional "chilled-mirror" hygrometers. Moreover, this DPS outperforms conventional "chilled-mirror" hygrometers with respect to size, cost and response time, paving the way for on-chip dew point detection and extension to applications for which the conventional technology is unsuitable because of size, cost, and other constraints.

An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics Platform

NASA Astrophysics Data System (ADS)

Tao, Jifang; Luo, Yu; Wang, Li; Cai, Hong; Sun, Tao; Song, Junfeng; Liu, Hui; Gu, Yuandong

2016-07-01

The dew point is the temperature at which vapour begins to condense out of the gaseous phase. The deterministic relationship between the dew point and humidity is the basis for the industry-standard “chilled-mirror” dew point hygrometers used for highly accurate humidity measurements, which are essential for a broad range of industrial and metrological applications. However, these instruments have several limitations, such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew point sensor (DPS) that features high accuracy, a small footprint, and fast response. The fundamental component of this DPS is a partially exposed photonic micro-ring resonator, which serves two functions simultaneously: 1) sensing the condensed water droplets via evanescent fields and 2) functioning as a highly accurate, in situ temperature sensor based on the thermo-optic effect (TOE). This device virtually eliminates most of the temperature-related errors that affect conventional “chilled-mirror” hygrometers. Moreover, this DPS outperforms conventional “chilled-mirror” hygrometers with respect to size, cost and response time, paving the way for on-chip dew point detection and extension to applications for which the conventional technology is unsuitable because of size, cost, and other constraints.

Micro-patterning and characterization of PHEMA-co-PAM-based optical chemical sensors for lab-on-a-chip applications

PubMed Central

Zhu, Haixin; Zhou, Xianfeng; Su, Fengyu; Tian, Yanqing; Ashili, Shashanka; Holl, Mark R.; Meldrum, Deirdre R.

2012-01-01

We report a novel method for wafer level, high throughput optical chemical sensor patterning, with precise control of the sensor volume and capability of producing arbitrary microscale patterns. Monomeric oxygen (O2) and pH optical probes were polymerized with 2-hydroxyethyl methacrylate (HEMA) and acrylamide (AM) to form spin-coatable and further crosslinkable polymers. A micro-patterning method based on micro-fabrication techniques (photolithography, wet chemical process and reactive ion etch) was developed to miniaturize the sensor film onto glass substrates in arbitrary sizes and shapes. The sensitivity of fabricated micro-patterns was characterized under various oxygen concentrations and pH values. The process for spatially integration of two sensors (Oxygen and pH) on the same substrate surface was also developed, and preliminary fabrication and characterization results were presented. To the best of our knowledge, it is the first time that poly (2-hydroxylethyl methacrylate)-co-poly (acrylamide) (PHEMA-co-PAM)-based sensors had been patterned and integrated at the wafer level with micron scale precision control using microfabrication techniques. The developed methods can provide a feasible way to miniaturize and integrate the optical chemical sensor system and can be applied to any lab-on-a-chip system, especially the biological micro-systems requiring optical sensing of single or multiple analytes. PMID:23175599

Autonomous micro and nano sensors for upstream oil and gas

NASA Astrophysics Data System (ADS)

Chapman, David; Trybula, Walt

2015-06-01

This paper describes the development of autonomous electronic micro and nanoscale sensor systems for very harsh downhole oilfield conditions and provides an overview of the operational requirements necessary to survive and make direct measurements of subsurface conditions. One of several significant developmental challenges is selecting appropriate technologies that are simultaneously miniaturize-able, integrate-able, harsh environment capable, and economically viable. The Advanced Energy Consortium (AEC) is employing a platform approach to developing and testing multi-chip, millimeter and micron-scale systems in a package at elevated temperature and pressure in API brine and oil analogs, with the future goal of miniaturized systems that enable the collection of previously unattainable data. The ultimate goal is to develop subsurface nanosensor systems that can be injected into oil and gas well bores, to gather and record data, providing an unparalleled level of direct reservoir characterization. This paper provides a status update on the research efforts and developmental successes at the AEC.

Cost-effective optical fiber pressure sensor based on intrinsic Fabry-Perot interferometric micro-cavities

NASA Astrophysics Data System (ADS)

Domingues, M. Fátima; Rodriguez, Camilo A.; Martins, Joana; Tavares, Cátia; Marques, Carlos; Alberto, Nélia; André, Paulo; Antunes, Paulo

2018-05-01

In this work, a cost-effective procedure to manufacture optical fiber pressure sensors is presented. This has a high relevance for integration in robotic exoskeletons or for gait plantar pressure monitoring within the physical rehabilitation scenarios, among other applications. The sensing elements are based on Fabry-Perot interferometric (FPI) micro-cavities, created from the recycling of optical fibers previously destroyed by the catastrophic fuse effect. To produce the pressure sensors, the fiber containing the FPI micro-cavities was embedded in an epoxy resin cylinder used as pressure transducer and responsible to transfer the pressure applied on its surface to the optical fiber containing the FPI micro-cavity. Before the embedding process, some FPI sensors were also characterized to strain variations. After that, the effect of the encapsulation of the FPI structure into the resin was assessed, from which a slight decrease on the FPI interferogram fringes visibility was verified, indicating a small increase in the micro-cavity length. Up on the sensors characterization, a linear dependence of the wavelength shift with the induced pressure was obtained, which leads to a maximum sensitivity of 59.39 ± 1.7 pm/kPa. Moreover, direct dependence of the pressure sensitivity with the micro-cavity volume and length was found.

Electronic measurements in an alternating magnetic field (AMF) for studying magnetic nanoparticle hyperthermia

NASA Astrophysics Data System (ADS)

Boekelheide, Z.; Hussein, Z. A.; Hartzell, S.

Magnetic nanoparticle hyperthermia is a promising cancer treatment in which magnetic nanoparticles are injected into a tumor and then exposed to an alternating magnetic field (AMF). This process releases heat and damages tumor cells, but the exact mechanisms behind the effectiveness of this therapy are still unclear. Accurate sensors are required to monitor the temperature and, potentially, other parameters such as magnetic field or mechanical stress during clinical therapy or lab research. Often, optical rather than electronic temperature sensors are used to avoid eddy current self-heating in conducting parts in the AMF. However, eddy current heating is strongly dependent on the size and geometry of the conducting part, thus micro- and nano-scale electronics are a promising possibility for further exploration into magnetic nanoparticle hyperthermia. This presentation quantitatively discusses the eddy current self-heating of thin wires (thermocouples) and will also present a proof of concept thin film resistive thermometer and magnetic field sensor along with measurements of their eddy current self-heating. The results show that electronic measurements are feasible in an AMF with both thin wires and patterned thin film sensors under certain conditions.

An Experimental Study on the Fabrication of Glass-based Acceleration Sensor Body Using Micro Powder Blasting Method

PubMed Central

Park, Dong-Sam; Yun, Dae-Jin; Cho, Myeong-Woo; Shin, Bong-Cheol

2007-01-01

This study investigated the feasibility of the micro powder blasting technique for the micro fabrication of sensor structures using the Pyrex glass to replace the existing silicon-based acceleration sensor fabrication processes. As the preliminary experiments, the effects of the blasting pressure, the mass flow rate of abrasive and the number of nozzle scanning times on erosion depth of the Pyrex and the soda lime glasses were examined. From the experimental results, optimal blasting conditions were selected for the Pyrex glass machining. The dimensions of the designed glass sensor was 1.7×1.7×0.6mm for the vibrating mass, and 2.9×0.7×0.2mm for the cantilever beam. The machining results showed that the dimensional errors of the machined glass sensor ranged from 3 μm in minimum to 20 μm in maximum. These results imply that the micro powder blasting method can be applied for the micromachining of glass-based acceleration sensors to replace the exiting method.

A wall shear stress sensor using a pair of sidewall doped cantilevers

NASA Astrophysics Data System (ADS)

Nguyen, Thanh-Vinh; Kazama, Ryohei; Takahashi, Hidetoshi; Takahata, Tomoyuki; Matsumoto, Kiyoshi; Shimoyama, Isao

2017-07-01

In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µm thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µm  ×  400 µm plate supported by two 150 µm long, 4 µm wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between  -10 and 10 m s-1 is demonstrated.

Fly Ear Inspired Miniature Acoustic Sensors for Detection and Localization

DTIC Science & Technology

2011-07-31

Micro-Opto-Electro-Mechnical-System ( MOEMS ) sensor platform that is capable of integrating multiplexed Fabry-Perot (FP) interferometer based sensors. A...on a single MOEMS chip is shown in Figure 8. Light from a low coherence light source with a coherence length Lc is first sent to the reference...towards developing a low coherence interferometer based MOEMS detection system. An optical Micro-Electro-Mechanical-System (MEMS) sensor platform was

A ph sensor based on a flexible substrate

NASA Astrophysics Data System (ADS)

Huang, Wen-Ding

pH sensor is an essential component used in many chemical, food, and bio-material industries. Conventional glass electrodes have been used to construct pH sensors, however, have some disadvantages. Glass electrodes are easily affected by alkaline or HF solution, they require a high input impedance pH meter, they often exhibit a sluggish response. In some specific applications, it is also difficult to use glass electrodes for in vivo biomedical or food monitoring applications due to the difficulty of size miniaturization, planarization and polymerization based on current manufacturing technologies. In this work, we have demonstrated a novel flexible pH sensor based on low-cost sol-gel fabrication process of iridium oxide (IrOx) sensing film (IROF). A pair of flexible miniature IrOx/AgCl electrode generated the action potential from the solution by electrochemical mechanism to obtain the pH level of the reagent. The fabrication process including sol-gel, thermal oxidation, and the electro-plating process of the silver chloride (AgCl) reference electrode were reported in the work. The IrOx film was verified and characterized using electron dispersive analysis (EDAX), scanning electron microscope (SEM), and x-ray diffraction (XRD). The flexible pH sensor's performance and characterization have been investigated with different testing parameters such as sensitivity, response time, stability, reversibility, repeatability, selectivity and temperature dependence. The flexible IrOx pH sensors exhibited promising sensing performance with a near-Nernstian response of sensitivity which is between --51.1mV/pH and --51.7mV/pH in different pH levels ranging from 1.5 to 12 at 25°C. Two applications including gastroesophageal reflux disease (GERD) diagnosis and food freshness wireless monitoring using our micro-flexible IrOx pH sensors were demonstrated. For the GERD diagnosing system, we embedded the micro flexible pH sensor on a 1.2cmx3.8cm of the capsule size of wireless sensor implanted inside the esophagus. Our pH electrode can monitor the pH changes of gastric juice in real time when the reflux happening in the esophagus. Our micro flexible pH sensor performed clear responses in each distinct pH reflux episode quickly and accurately comparing with the other commercial pH monitoring system. For the food freshness monitoring applications, we used the flexible pH sensor as a freshness indicator to monitor the pH changing profile during the food spoilage procedure. The sensor was then embedded with radio frequency identification (RFID) based passive telemetry enabling remote monitoring of food freshness. In the result, our pH-wireless RFID system presented 633Hz/pH of the sensitivity in the frequency calibration. The calibration of stability and dynamical response of the RFID system were also demonstrated before the test on food freshness monitoring. Finally, a white fish meat for long term spoilage procedure monitoring was applied and tested by using our wireless IrOx pH sensing system. Our RFID pH sensing module is able to monitor, collect and transmit the pH information continuously for 18 hours during the food spoilage procedure. In this dissertation, a micro size of IrOx/AgCl pH sensor was fabricated on a flexible substrate. The physical properties of the IrO x thin film was verified in the work. The different sensing capability such as the sensitivity, stability, reversibility, response time, repeatability, selectivity, and temperature dependence was then demonstrated in this work. After the different in-vitro tests, the pH sensor were embedded with our passive RFID circuitry for the in-vivo GERD diagnosis and food freshness monitoring application. Our wireless pH sensing system was able to deliver the accurate and quick pH sensing data wirelessly. In conclusion, our deformable IrOx pH electrodes have been demonstrated with the advantages of accommodating and conforming sensors in small spaces or curved surfaces. This miniature IrOx pH sensor can respond to distinct potentials of the various pH levels as traditional glass electrodes, however, the miniature, bio-compatible and flexible substrate and the ability to be integrated in batterryless telemetry enable the pH sensor to be applied on many new medical, bio-chemical and biological field.

Design of nodes for embedded and ultra low-power wireless sensor networks

NASA Astrophysics Data System (ADS)

Xu, Jun; You, Bo; Cui, Juan; Ma, Jing; Li, Xin

2008-10-01

Sensor network integrates sensor technology, MEMS (Micro-Electro-Mechanical system) technology, embedded computing, wireless communication technology and distributed information management technology. It is of great value to use it where human is quite difficult to reach. Power consumption and size are the most important consideration when nodes are designed for distributed WSN (wireless sensor networks). Consequently, it is of great importance to decrease the size of a node, reduce its power consumption and extend its life in network. WSN nodes have been designed using JN5121-Z01-M01 module produced by jennic company and IEEE 802.15.4/ZigBee technology. Its new features include support for CPU sleep modes and a long-term ultra low power sleep mode for the entire node. In low power configuration the node resembles existing small low power nodes. An embedded temperature sensor node has been developed to verify and explore our architecture. The experiment results indicate that the WSN has the characteristic of high reliability, good stability and ultra low power consumption.

3D sensors and micro-fabricated detector systems

NASA Astrophysics Data System (ADS)

Da Vià, Cinzia

2014-11-01

Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development.

Monitoring Indoor Air Quality for Enhanced Occupational Health.

PubMed

Pitarma, Rui; Marques, Gonçalo; Ferreira, Bárbara Roque

2017-02-01

Indoor environments are characterized by several pollutant sources. Because people spend more than 90% of their time in indoor environments, several studies have pointed out the impact of indoor air quality on the etiopathogenesis of a wide number of non-specific symptoms which characterizes the "Sick Building Syndrome", involving the skin, the upper and lower respiratory tract, the eyes and the nervous system, as well as many building related diseases. Thus, indoor air quality (IAQ) is recognized as an important factor to be controlled for the occupants' health and comfort. The majority of the monitoring systems presently available is very expensive and only allow to collect random samples. This work describes the system (iAQ), a low-cost indoor air quality monitoring wireless sensor network system, developed using Arduino, XBee modules and micro sensors, for storage and availability of monitoring data on a web portal in real time. Five micro sensors of environmental parameters (air temperature, humidity, carbon monoxide, carbon dioxide and luminosity) were used. Other sensors can be added for monitoring specific pollutants. The results reveal that the system can provide an effective indoor air quality assessment to prevent exposure risk. In fact, the indoor air quality may be extremely different compared to what is expected for a quality living environment. Systems like this would have benefit as public health interventions to reduce the burden of symptoms and diseases related to "sick buildings".

A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates

PubMed Central

Xu, Lizhong

2018-01-01

In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively. PMID:29373546

A Micro-Resonant Gas Sensor with Nanometer Clearance between the Pole Plates.

PubMed

Fu, Xiaorui; Xu, Lizhong

2018-01-26

In micro-resonant gas sensors, the capacitive detection is widely used because of its simple structure. However, its shortcoming is a weak signal output caused by a small capacitance change. Here, we reduced the initial clearance between the pole plates to the nanometer level, and increased the capacitance between the pole plates and its change during resonator vibration. We propose a fabricating process of the micro-resonant gas sensor by which the initial clearance between the pole plates is reduced to the nanometer level and a micro-resonant gas sensor with 200 nm initial clearance is fabricated. With this sensor, the resonant frequency shifts were measured when they were exposed to several different vapors, and high detection accuracies were obtained. The detection accuracy with respect to ethanol vapor was 0.4 ppm per Hz shift, and the detection accuracy with respect to hydrogen and ammonias vapors was 3 ppm and 0.5 ppm per Hz shift, respectively.

Design and validation of a low cost surface plasmon resonance bioanalyzer using microprocessors and a touch-screen monitor.

PubMed

Hu, Jiandong; Hu, Jingfang; Luo, Fukun; Li, Wei; Jiang, Guoliang; Li, Zhengfeng; Zhang, Runna

2009-03-15

An economical and high-performance bioanalyzer, with no use of laptop computer, based on the use of TSPR1k23 biosensors was systematically designed, and validated experimentally for its high performance. The analyzer is composed of a micro-flow cell, a thermoelectric cooler (TEC), a clamp, a touch-screen monitor, and an electronic control unit (ECU) incorporated with photoelectric conversion device. The micro-flow cell is made of stainless steel with high thermal conductivity, and the micro-flow system is based on PID temperature-controlled algorithm to keep the constant temperature (25 degrees C) of the liquid sample via thermal exchange with the clamp. With a peristaltic pump implemented by an injection loop flow system, the bioanalyzer allows the core sensor to be completely exposed to samples. The touch-screen monitor displays the normalized response signal values updated every 0.25s, with a typical noise level less than 5RU (response unit) within 2h. The bioanalyzer was validated using hepatitis B surface antigen (HBsAg) as an example. Anti-HBsAg monoclonal antibody is adhered to the surface of the sensor chip by a bifunctional cross-linker with the technology of self-assembly. The duration of the HBsAg measurement only lasts 5min with a dilution factor ranging from 200 to 1200, optimized with a R-squared value 0.998. The results suggested that the bioanalyzer has higher selectivity, lower cost, expanded detection limit, and shorter measuring time as compared with the HBsAg ELISA kit, especially for low concentrations of analyte.

Wireless and chip-less passive radiation sensors for high dose monitoring

DOE Office of Scientific and Technical Information (OSTI.GOV)

Debourg, E.; Aubert, H.; Pons, P.

The safety of nuclear infrastructures may involve the monitoring of many parameters in harsh environments (high radiation level, high temperature, high pressure,..). If technological solutions exist for transducers part in such environments, the electronic part used in reader is not appropriate and still a challenging task. Well-known solutions to remove the electronic part from the harsh environment consist of connecting the transducer and the reader by long electrical wires or performing ex situ remote sensing. However wires may practically be difficult to implement while ex situ measurements are not compatible with on line monitoring. Wireless and passive sensors working inmore » harsh environments could be an appropriate solution for the remote sensing of critical parameters. Passive sensors without electronics in the sensing unit are available (e.g., SAW sensors) but they suffer from short reading range (typically lower than 10 meters). In order to overcome this range limitation a new class of electromagnetic transducers was developed in the mid-2000's. The operating principle is based on the modification of the properties of high-frequency (>> 1 GHz) passive electromagnetic devices by the quantity to be measured. Based on this principle a wide range of sensing properties can be addressed and a large number of materials can be chosen. Moreover the use of high frequency allows reducing the size of the sensor elements (antenna, transducer) and enhancing the immunity to multi-path. Several principles of RF transducers have been already validated by LAAS-CNRS (e;g; pressure, temperature, stress) as well as radar-based solution for the wireless long-range sensors interrogation. The sensor dosimeter exploit here the known property of Hydrogen-Pressure Dosimeters (HPD) for which the polymer material dehydrogenates under nuclear irradiation. The transducer principle is described. The irradiation will generate the out-gazing (hydrogen) of the polymer inside a micro-chamber. The resulting overpressure leads to the deflection of a silicon membrane which modifies the resonant frequency of the RF resonator. Tests structures have been designed in order to quantify the HDPE out-gazing inside a micro-cavity by measuring the deflection of a boss silicon membrane with a mechanical profiler. A specific set up using interferometry method has been also developed to evaluate the pressure generated inside the micro-cavity. The procedure consists in applying a pressure that pushes the membrane to recover a flat membrane. This condition is monitored thanks to the extinction of the Newton rings. Irradiations have been performed up to 30 kGy using 6 MeV focused e-beam providing by electron accelerator. Membrane deflection and generated pressure around 0.2 μm/mg{sub HDPE}/kGy and 70 mbar/mg{sub HDPE}/kGy has been obtained for a 70 μm thick membrane. In order to characterize the hermetic sealing of the micro-chamber under hydrogen over-pressure, membrane deflection after irradiation has been recorded during 50 days. The variations of membrane deflection are randomly distributed and generally lower than ±5%, showing a good hermeticity during this period. (authors)« less

A Study of Thermistor Performance within a Textile Structure

PubMed Central

Hughes-Riley, Theodore; Lugoda, Pasindu; Dias, Tilak; Trabi, Christophe L.; Morris, Robert H.

2017-01-01

Textiles provide an ideal structure for embedding sensors for medical devices. Skin temperature measurement is one area in which a sensor textile could be particularly beneficial; pathological skin is normally very sensitive, making the comfort of anything placed on that skin paramount. Skin temperature is an important parameter to measure for a number of medical applications, including for the early detection of diabetic foot ulcer formation. To this end an electronic temperature-sensor yarn was developed by embedding a commercially available thermistor chip into the fibres of a yarn, which can be used to produce a textile or a garment. As part of this process a resin was used to encapsulate the thermistor. This protects the thermistor from mechanical and chemical stresses, and also allows the sensing yarn to be washed. Building off preliminary work, the behaviour and performance of an encapsulated thermistor has been characterised to determine the effect of encapsulation on the step response time and absolute temperature measurements. Over the temperature range of interest only a minimal effect was observed, with step response times varying between 0.01–0.35 s. A general solution is presented for the heat transfer coefficient compared to size of the micro-pod formed by the encapsulation of the thermistor. Finally, a prototype temperature-sensing sock was produced using a network of sensing yarns as a demonstrator of a system that could warn of impending ulcer formation in diabetic patients. PMID:28783067

Capacitance variation measurement method with a continuously variable measuring range for a micro-capacitance sensor

NASA Astrophysics Data System (ADS)

Lü, Xiaozhou; Xie, Kai; Xue, Dongfeng; Zhang, Feng; Qi, Liang; Tao, Yebo; Li, Teng; Bao, Weimin; Wang, Songlin; Li, Xiaoping; Chen, Renjie

2017-10-01

Micro-capacitance sensors are widely applied in industrial applications for the measurement of mechanical variations. The measurement accuracy of micro-capacitance sensors is highly dependent on the capacitance measurement circuit. To overcome the inability of commonly used methods to directly measure capacitance variation and deal with the conflict between the measurement range and accuracy, this paper presents a capacitance variation measurement method which is able to measure the output capacitance variation (relative value) of the micro-capacitance sensor with a continuously variable measuring range. We present the principles and analyze the non-ideal factors affecting this method. To implement the method, we developed a capacitance variation measurement circuit and carried out experiments to test the circuit. The result shows that the circuit is able to measure a capacitance variation range of 0-700 pF linearly with a maximum relative accuracy of 0.05% and a capacitance range of 0-2 nF (with a baseline capacitance of 1 nF) with a constant resolution of 0.03%. The circuit is proposed as a new method to measure capacitance and is expected to have applications in micro-capacitance sensors for measuring capacitance variation with a continuously variable measuring range.

Micro-controller based air pressure monitoring instrumentation system using optical fibers as sensor

NASA Astrophysics Data System (ADS)

Hazarika, D.; Pegu, D. S.

2013-03-01

This paper describes a micro-controller based instrumentation system to monitor air pressure using optical fiber sensors. The principle of macrobending is used to develop the sensor system. The instrumentation system consists of a laser source, a beam splitter, two multi mode optical fibers, two Light Dependent Resistance (LDR) based timer circuits and a AT89S8252 micro-controller. The beam splitter is used to divide the laser beam into two parts and then these two beams are launched into two multi mode fibers. One of the multi mode fibers is used as the sensor fiber and the other one is used as the reference fiber. The use of the reference fiber is to eliminate the environmental effects while measuring the air pressure magnitude. The laser beams from the sensor and reference fibers are applied to two identical LDR based timer circuits. The LDR based timer circuits are interfaced to a micro-controller through its counter pins. The micro-controller samples the frequencies of the timer circuits using its counter-0 and counter-1 and the counter values are then processed to provide the measure of air pressure magnitude.

Porous silicon-VO{sub 2} based hybrids as possible optical temperature sensor: Wavelength-dependent optical switching from visible to near-infrared range

DOE Office of Scientific and Technical Information (OSTI.GOV)

Antunez, E. E.; Salazar-Kuri, U.; Estevez, J. O.

Morphological properties of thermochromic VO{sub 2}—porous silicon based hybrids reveal the growth of well-crystalized nanometer-scale features of VO{sub 2} as compared with typical submicron granular structure obtained in thin films deposited on flat substrates. Structural characterization performed as a function of temperature via grazing incidence X-ray diffraction and micro-Raman demonstrate reversible semiconductor-metal transition of the hybrid, changing from a low-temperature monoclinic VO{sub 2}(M) to a high-temperature tetragonal rutile VO{sub 2}(R) crystalline structure, coupled with a decrease in phase transition temperature. Effective optical response studied in terms of red/blue shift of the reflectance spectra results in a wavelength-dependent optical switching withmore » temperature. As compared to VO{sub 2} film over crystalline silicon substrate, the hybrid structure is found to demonstrate up to 3-fold increase in the change of reflectivity with temperature, an enlarged hysteresis loop and a wider operational window for its potential application as an optical temperature sensor. Such silicon based hybrids represent an exciting class of functional materials to display thermally triggered optical switching culminated by the characteristics of each of the constituent blocks as well as device compatibility with standard integrated circuit technology.« less

Polymer Electrolyte-Based Ambient Temperature Oxygen Microsensors for Environmental Monitoring

NASA Technical Reports Server (NTRS)

Hunter, Gary W.; Xu, Jennifer C.; Liu, Chung-Chiun

2011-01-01

An ambient temperature oxygen microsensor, based on a Nafion polymer electrolyte, has been developed and was microfabricated using thin-film technologies. A challenge in the operation of Nafion-based sensor systems is that the conductivity of Nafion film depends on the humidity in the film. Nafion film loses conductivity when the moisture content in the film is too low, which can affect sensor operation. The advancement here is the identification of a method to retain the operation of the Nafion films in lower humidity environments. Certain salts can hold water molecules in the Nafion film structure at room temperature. By mixing salts with the Nafion solution, water molecules can be homogeneously distributed in the Nafion film increasing the film s hydration to prevent Nafion film from being dried out in low-humidity environment. The presence of organics provides extra sites in the Nafion film to promote proton (H+) mobility and thus improving Nafion film conductivity and sensor performance. The fabrication of ambient temperature oxygen microsensors includes depositing basic electrodes using noble metals, and metal oxides layer on one of the electrode as a reference electrode. The use of noble metals for electrodes is due to their strong catalytic properties for oxygen reduction. A conducting polymer Nafion, doped with water-retaining components and extra sites facilitating proton movement, was used as the electrolyte material, making the design adequate for low humidity environment applications. The Nafion solution was coated on the electrodes and air-dried. The sensor operates at room temperature in potentiometric mode, which measures voltage differences between working and reference electrodes in different gases. Repeat able responses to 21-percent oxygen in nitrogen were achieved using nitrogen as a baseline gas. Detection of oxygen from 7 to 21 percent has also been demonstrated. The room-temperature oxygen micro sensor developed has extremely low power consumption (no heating for operation, no voltage applied to the sensor, only a voltmeter is needed to measure the output), is small in size, is simple to batch-fabricate, and is high in sensor yield. It is applicable in a wide humidity range, with improved operation in low humidity after the additives were added to the Nafion film. Through further improvement and development, the sensor can be used for aerospace applications such as fuel leak detection, fire detection, and environmental monitoring.

A Micro Bubble Structure Based Fabry–Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics

PubMed Central

Yan, Lu; Gui, Zhiguo; Wang, Guanjun; An, Yongquan; Gu, Jinyu; Zhang, Meiqin; Liu, Xinglin; Wang, Zhibin; Wang, Gao; Jia, Pinggang

2017-01-01

A high-sensitivity, low-cost, ultrathin, hollow fiber micro bubble structure was proposed; such a bubble can be used to develop a high-sensitivity strain sensor based on a Fabry–Perot interferometer (FPI). The micro bubble is fabricated at the fiber tip by splicing a glass tube to a single mode fiber (SMF) and then the glass tube is filled with gas in order to expand and form a micro bubble. The sensitivity of the strain sensor with a cavity length of about 155 μm and a bubble wall thickness of about 6 μm was measured to be up to 8.14 pm/με. PMID:28282960

A Micro Bubble Structure Based Fabry-Perot Optical Fiber Strain Sensor with High Sensitivity and Low-Cost Characteristics.

PubMed

Yan, Lu; Gui, Zhiguo; Wang, Guanjun; An, Yongquan; Gu, Jinyu; Zhang, Meiqin; Liu, Xinglin; Wang, Zhibin; Wang, Gao; Jia, Pinggang

2017-03-09

A high-sensitivity, low-cost, ultrathin, hollow fiber micro bubble structure was proposed; such a bubble can be used to develop a high-sensitivity strain sensor based on a Fabry-Perot interferometer (FPI). The micro bubble is fabricated at the fiber tip by splicing a glass tube to a single mode fiber (SMF) and then the glass tube is filled with gas in order to expand and form a micro bubble. The sensitivity of the strain sensor with a cavity length of about 155 μm and a bubble wall thickness of about 6 μm was measured to be up to 8.14 pm/μϵ.

A Carbon Nanotube Reporter of miRNA Hybridization Events In Vivo

PubMed Central

Harvey, Jackson D.; Jena, Prakrit V.; Baker, Hanan A.; Zerze, Gül H.; Williams, Ryan M.; Galassi, Thomas V.; Roxbury, Daniel; Mittal, Jeetain

2017-01-01

MicroRNAs and other small oligonucleotides in biofluids are promising disease biomarkers, yet conventional assays require complex processing steps that are unsuitable for point-of-care testing or for implantable or wearable sensors. Single-walled carbon nanotubes are an ideal material for implantable sensors, owing to their emission in the near-infrared spectral region, photostability and exquisite sensitivity. Here, we report an engineered carbon-nanotube-based sensor capable of real-time optical quantification of hybridization events of microRNA and other oligonucleotides. The mechanism of the sensor arises from competitive effects between displacement of both oligonucleotide charge groups and water from the nanotube surface, which result in a solvatochromism-like response. The sensor, which allows for detection via single-molecule sensor elements and for multiplexing by using multiple nanotube chiralities, can monitor toehold-based strand-displacement events, which reverse the sensor response and regenerate the sensor complex. We also show that the sensor functions in whole urine and serum, and can non-invasively measure DNA and microRNA after implantation in live mice. PMID:28845337

A Carbon Nanotube Reporter of miRNA Hybridization Events In Vivo.

PubMed

Harvey, Jackson D; Jena, Prakrit V; Baker, Hanan A; Zerze, Gül H; Williams, Ryan M; Galassi, Thomas V; Roxbury, Daniel; Mittal, Jeetain; Heller, Daniel A

2017-01-01

MicroRNAs and other small oligonucleotides in biofluids are promising disease biomarkers, yet conventional assays require complex processing steps that are unsuitable for point-of-care testing or for implantable or wearable sensors. Single-walled carbon nanotubes are an ideal material for implantable sensors, owing to their emission in the near-infrared spectral region, photostability and exquisite sensitivity. Here, we report an engineered carbon-nanotube-based sensor capable of real-time optical quantification of hybridization events of microRNA and other oligonucleotides. The mechanism of the sensor arises from competitive effects between displacement of both oligonucleotide charge groups and water from the nanotube surface, which result in a solvatochromism-like response. The sensor, which allows for detection via single-molecule sensor elements and for multiplexing by using multiple nanotube chiralities, can monitor toehold-based strand-displacement events, which reverse the sensor response and regenerate the sensor complex. We also show that the sensor functions in whole urine and serum, and can non-invasively measure DNA and microRNA after implantation in live mice.

Dielectric micro-resonator-based opto-mechanical systems for sensing applications

NASA Astrophysics Data System (ADS)

Ali, Amir Roushdy

In recent years, whispering gallery mode (WGM), or morphology dependent optical resonances (MDR) of dielectric micro-resonators have attracted interest with proposed applications in a wide range of areas due to the high optical quality factors, Q, they can exhibit (reaching ~ 10. 9 for silica spheres). Micro-resonator WGMs have been used in applications that include those in spectroscopy, micro-cavity laser technology, optical communications (switching, filtering and multiplexing), sensors technologies and even chemical and biological sensing. The WGM of these dielectric micro-resonators are highly sensitive to morphological changes (such as the size, shape, or refractive index) of the resonance cavity and hence, can be tuned by causing a minute change in the physical condition of the surrounding. In this dissertation, we have been creating opto-mechanical systems, which at their most basic, are extraordinarily sensitive sensors. One of the ultimate goals of this dissertation is to develop sensors capable of detecting the extremely small electric field changes. To improve the performance of the sensors, we couple a polymer cantilever beam to a dielectric micro-resonator. The eventual use of such ultra sensitive electric filed sensors could include neural-machine interfaces for advanced prosthetics devices. The work presented here includes a basic analysis and experimental investigations of the electric field sensitivity and range of micro-resonators of several different materials and geometries followed by the electric field sensor design, testing, and characterization. Also, the effects of angular velocity on the WGM shifts of spherical micro-resonators are also investigated. The elastic deformation that is induced on a spinning resonator due to the centrifugal force may lead to a sufficient shift in the optical resonances and therefore interfering with its desirable operational sensor design. Furthermore, this principle could be used for the development of angular speed detection photonic sensors. In previous applications, the WGM shifts induced by the external effects were monitored by identifying and tracking individual resonance dip in the optical transmission spectrum. The success of the WGM sensors is strongly dependent on the precise and speeds tracking of the shifts of the resonant wavelengths. In this dissertation, we demonstrate the application of WGM micro-resonators for high-speed transient sensing (wide-bandwidth). To facilitate the use of the sensors for high-speed transient applications, we tune the interrogation laser using a harmonic rather than a ramp waveform and calibrate the laser response at various input frequencies and amplitudes using a Fabry-Perot interferometer. WGM shifts are tracked using a fast cross-correlation algorithm on the transmission spectra. We demonstrate dynamic force measurements up to 10 kHz using this approach. We also present a simple lumped-heat capacity thermal model to predict the laser's tuning response.

A novel amperometric biosensor based on banana peel (Musa cavendish) tissue homogenate for determination of phenolic compounds.

PubMed

Ozcan, Hakki Mevlut; Sagiroglu, Ayten

2010-08-01

In this study the biosensor was constructed by immobilizing tissue homogenate of banana peel onto a glassy carbon electrode surface. Effects of immobilization materials amounts, effects of pH, buffer concentration and temperature on biosensor response were studied. In addition, the detection ranges of 13 phenolic compounds were obtained with the help of the calibration graphs. Storage stability, repeatability of the biosensor, inhibitory effect and sample applications were also investigated. A typical calibration curve for the sensor revealed a linear range of 10-80 microM catechol. In reproducibility studies, variation coefficient and standard deviation were calculated as 2.69%, 1.44 x 10(-3) microM, respectively.

Innovative smart micro sensors for Army weaponry applications

NASA Astrophysics Data System (ADS)

Ruffin, Paul B.; Brantley, Christina; Edwards, Eugene

2008-03-01

Micro sensors offer the potential solution to cost, size, and weight issues associated with smart networked sensor systems designed for environmental/missile health monitoring and rocket out-gassing/fuel leak detection, as well as situational awareness on the battlefield. In collaboration with the University of Arkansas (Fayetteville), University of Alabama (Tuscaloosa and Birmingham), Alabama A&M University (Normal), and Streamline Automation (Huntsville, AL), scientists and engineers at the Army Aviation & Missile Research, Development, and Engineering Center (AMRDEC) are investigating several nano-based technologies to solve the problem of sensing extremely small levels of toxic gases associated with both chemical warfare agents (in air and liquids) and potential rocket motor leaks. Innovative techniques are being devised to adapt voltammetry, which is a well established technique for the detection and quantification of substances dissolved in liquids, to low-cost micro sensors for detecting airborne chemical agents and potential missile propellant leakages. In addition, a surface enhanced Raman scattering (SERS) technique, which enhances Raman scattered light by excitation of surface plasmons on nanoporous metal surfaces (nanospheres), is being investigated to develop novel smart sensors for the detection of chemical agents (including rocket motor out-gassing) and potential detection of home-made explosive devices. In this paper, results are delineated that are associated with experimental studies, which are conducted for the aforementioned cases and for several other nano-based technology approaches. The design challenges of each micro sensor technology approach are discussed. Finally, a comparative analysis of the various innovative micro-sensor techniques is provided.

Time and Space Resolved Heat Transfer Measurements Under Nucleate Bubbles with Constant Heat Flux Boundary Conditions

NASA Technical Reports Server (NTRS)

Myers, Jerry G.; Hussey, Sam W.; Yee, Glenda F.; Kim, Jungho

2003-01-01

Investigations into single bubble pool boiling phenomena are often complicated by the difficulties in obtaining time and space resolved information in the bubble region. This usually occurs because the heaters and diagnostics used to measure heat transfer data are often on the order of, or larger than, the bubble characteristic length or region of influence. This has contributed to the development of many different and sometimes contradictory models of pool boiling phenomena and dominant heat transfer mechanisms. Recent investigations by Yaddanapyddi and Kim and Demiray and Kim have obtained time and space resolved heat transfer information at the bubble/heater interface under constant temperature conditions using a novel micro-heater array (10x10 array, each heater 100 microns on a side) that is semi-transparent and doubles as a measurement sensor. By using active feedback to maintain a state of constant temperature at the heater surface, they showed that the area of influence of bubbles generated in FC-72 was much smaller than predicted by standard models and that micro-conduction/micro-convection due to re-wetting dominated heat transfer effects. This study seeks to expand on the previous work by making time and space resolved measurements under bubbles nucleating on a micro-heater array operated under constant heat flux conditions. In the planned investigation, wall temperature measurements made under a single bubble nucleation site will be synchronized with high-speed video to allow analysis of the bubble energy removal from the wall.

Fiber-optical sensor with intensity compensation model in college teaching of physics experiment

NASA Astrophysics Data System (ADS)

Su, Liping; Zhang, Yang; Li, Kun; Zhang, Yu

2017-08-01

Optical fiber sensor technology is one of the main contents of modern information technology, which has a very important position in modern science and technology. Fiber optic sensor experiment can improve students' enthusiasm and broaden their horizons in college physics experiment. In this paper the main structure and working principle of fiberoptical sensor with intensity compensation model are introduced. And thus fiber-optical sensor with intensity compensation model is applied to measure micro displacement of Young's modulus measurement experiment and metal linear expansion coefficient measurement experiment in the college physics experiment. Results indicate that the measurement accuracy of micro displacement is higher than that of the traditional methods using fiber-optical sensor with intensity compensation model. Meanwhile this measurement method makes the students understand on the optical fiber, sensor and nature of micro displacement measurement method and makes each experiment strengthen relationship and compatibility, which provides a new idea for the reform of experimental teaching.

Design and fabrication of a differential scanning nanocalorimeter

DOE PAGES

Zuo, Lei; Chen, Xiaoming; Yu, Shifeng; ...

2016-12-19

This paper describes the design, fabrication, and characterization of a differential scanning nanocalorimeter that significantly reduces the sample volume to microliters and can potentially improve the temperature sensitivity to 10 µK. The nanocalorimeter consists of a polymeric freestanding membrane, four high-sensitive low-noise thermistors based on silicon carbide (SiC), and a platinum heater and temperature sensor. With the integrated heater and sensors, temperature scanning and power compensation can be achieved for calorimetric measurement. Temperature sensing SiC film was prepared by using sintered SiC target and DC magnetron sputtering under different gas pressures and sputtering power. The SiC sensing material is characterizedmore » through the measurement of current–voltage curves and noise levels. The thermal performance of a fabricated nanocalorimeter is studied in simulation and experiment. The experiment results show the device has excellent thermal isolation to hold thermal energy. As a result, the noise test together with the simulation show the device is promising for micro 10 µK temperature sensitivity and nanowatt resolution which will lead to low-volume ultra-sensitive nanocalorimetry for biological processes, such as protein folding and ligand binding.« less

Smart focal-plane technology for micro-instruments and micro-rovers

NASA Technical Reports Server (NTRS)

Fossum, Eric R.

1993-01-01

It is inevitable that micro-instruments and micro-rovers for space exploration will contain one or more focal-plane arrays for imaging, spectroscopy, or navigation. In this paper, we explore the state-of-the-art in focal-plane technology for visible sensors. Also discussed is present research activity in advanced focal-plane technology with particular emphasis on the development of smart sensors. The paper concludes with a discussion of possible future directions for the advancement of the technology.

Study on the Correlation between Humidity and Material Strains in Separable Micro Humidity Sensor Design.

PubMed

Chang, Chih-Yuan

2017-05-08

Incidents of injuries caused by tiles falling from building exterior walls are frequently reported in Taiwan. Humidity is an influential factor in tile deterioration but it is more difficult to measure the humidity inside a building structure than the humidity in an indoor environment. Therefore, a separable microsensor was developed in this study to measure the humidity of the cement mortar layer with a thickness of 1.5-2 cm inside the external wall of a building. 3D printing technology is used to produce an encapsulation box that can protect the sensor from damage caused by the concrete and cement mortar. The sensor is proven in this study to be capable of measuring temperature and humidity simultaneously and the measurement results are then used to analyze the influence of humidity on external wall tile deterioration.

FPGA-based multiprocessor system for injection molding control.

PubMed

Muñoz-Barron, Benigno; Morales-Velazquez, Luis; Romero-Troncoso, Rene J; Rodriguez-Donate, Carlos; Trejo-Hernandez, Miguel; Benitez-Rangel, Juan P; Osornio-Rios, Roque A

2012-10-18

The plastic industry is a very important manufacturing sector and injection molding is a widely used forming method in that industry. The contribution of this work is the development of a strategy to retrofit control of an injection molding machine based on an embedded system microprocessors sensor network on a field programmable gate array (FPGA) device. Six types of embedded processors are included in the system: a smart-sensor processor, a micro fuzzy logic controller, a programmable logic controller, a system manager, an IO processor and a communication processor. Temperature, pressure and position are controlled by the proposed system and experimentation results show its feasibility and robustness. As validation of the present work, a particular sample was successfully injected.

A long-term stable power supply μDMFC stack for wireless sensor node applications

NASA Astrophysics Data System (ADS)

Wu, Z. L.; Wang, X. H.; Teng, F.; Li, X. Z.; Wu, X. M.; Liu, L. T.

2013-12-01

A passive, air-breathing 4-cell micro direct methanol fuel cell (μDMFC) stack is presented featured by a fuel delivery structure for a long-term & stable power supply. The fuel is reserved in a T shape tank and diffuses through the porous diffusion layer to the catalyst at anode. The stack has a maximum power output of 110mW with 3M methanol at room temperature and output a stable power even thought 5% fuel is the remained in reservoir. Its performance decreases less than 3% for 100 hours continuous work. As such, it is believed to be more applicable for powering the wireless sensor nodes.

Micro guidance and control synthesis: New components, architectures, and capabilities

NASA Technical Reports Server (NTRS)

Mettler, Edward; Hadaegh, Fred Y.

1993-01-01

New GN&C (guidance, navigation and control) system capabilities are shown to arise from component innovations that involve the synergistic use of microminiature sensors and actuators, microelectronics, and fiber optics. Micro-GN&C system and component concepts are defined that include micro-actuated adaptive optics, micromachined inertial sensors, fiber-optic data nets and light-power transmission, and VLSI microcomputers. The thesis is advanced that these micro-miniaturization products are capable of having a revolutionary impact on space missions and systems, and that GN&C is the pathfinder micro-technology application that can bring that about.

Organic vapor discrimination with chemiresistor arrays of temperature modulated tin-oxide nanowires and thiolate-monolayer-protected gold nanoparticles.

PubMed

Scholten, K; Bohrer, F I; Dattoli, E; Lu, W; Zellers, E T

2011-03-25

This paper explores the discrimination of organic vapors with arrays of chemiresistors (CRs) employing interface layers of tin-oxide nanowires (NWs) and thiolate-monolayer-protected gold nanoparticles (MPNs). The former devices use contact-printed mats of NWs on micro-hotplate membranes to bridge a pair of metal electrodes. Oxidation at the NW surface causes changes in charge transport, the temperature dependence of which differs among different vapors, permitting vapor discrimination. The latter devices use solvent cast films of MPNs on interdigital electrodes operated at room temperature. Sorption into the organic monolayers causes changes in film tunneling resistance that differ among different vapors and MPN structures, permitting vapor discrimination. Here, we compare the performance and assess the 'complementarity' of these two types of sensors. Calibrated responses from an NW CR operated at two different temperatures and from a set of four different MPN CRs were generated for three test vapors: n-hexane, toluene, and nitromethane. This pooled data set was then analyzed using principal components regression classification models with varying degrees of random error superimposed on the responses via Monte Carlo simulation in order to estimate the rates of recognition/discrimination for arrays comprising different combinations of sensors. Results indicate that the diversity of most of the dual MPN-CR arrays exceeds that of the dual NW-CR array. Additionally, in assessing all possible arrays of 4-6 CR sensors, the recognition rates of the hybrid arrays (i.e. MPN + NW) were no better than that of the 4-sensor array containing only MPN CRs.

Effect of Substrate Roughness on Adhesion and Structural Properties of Ti-Ni Shape Memory Alloy Thin Film.

PubMed

Kim, Donghwan; Lee, Hyunsuk; Bae, Joohyeon; Jeong, Hyomin; Choi, Byeongkeun; Nam, Taehyun; Noh, Jungpil

2018-09-01

Ti-Ni shape memory alloy (SMA) thin films are very attractive material for industrial and medical applications such as micro-actuator, micro-sensors, and stents for blood vessels. An important property besides shape memory effect in the application of SMA thin films is the adhesion between the film and the substrate. When using thin films as micro-actuators or micro-sensors in MEMS, the film must be strongly adhered to the substrate. On the other hand, when using SMA thin films in medical devices such as stents, the deposited alloy thin film must be easily separable from the substrate for efficient processing. In this study, we investigated the effect of substrate roughness on the adhesion of Ti-Ni SMA thin films, as well as the structural properties and phase-transformation behavior of the fabricated films. Ti-Ni SMA thin films were deposited onto etched glass substrates with magnetron sputtering. Radio frequency plasma was used for etching the substrate. The adhesion properties were investigated through progressive scratch test. Structural properties of the films were determined via Feld emission scanning electron microscopy, X-ray diffraction measurements (XRD) and Energy-dispersive X-ray spectroscopy analysis. Phase transformation behaviors were observed with differential scanning calorimetry and low temperature-XRD. Ti-Ni SMA thin film deposited onto rough substrate provides higher adhesive strength than smooth substrate. However the roughness of the substrate has no influence on the growth and crystallization of the Ti-Ni SMA thin films.

Micro-satellites thermal control—concepts and components

NASA Astrophysics Data System (ADS)

Baturkin, Volodymyr

2005-01-01

The main idea of this paper is to present the survey of current tendencies in micro-satellites thermal control concepts that can be rational and useful for posterior missions due to intensive expansion of satellites of such type. For this purpose, the available references and lessons learned by the National Technical University of Ukraine during the elaboration of thermal control hardware for micro-satellites Magion 4, 5, BIRD and autonomous thermal control systems for interplanetary missions VEGA, PHOBOS have been used. The main parameters taken into consideration for analysis are the satellite sizes, mass, power consumption, orbit parameters, altitude control peculiarities and thermal control description. It was defined that passive thermal control concepts are widely used, excepting autonomous temperature regulation for sensitive components such as batteries, high-precision optics, and some types of sensors. The practical means for realization of passive thermal control design as multi-layer insulation, optical coatings, heat conductive elements, gaskets are briefly described.

Synthesis of ZnO Hexagonal Micro Discs on Glass Substrates Using the Spray Pyrolysis Technique

NASA Astrophysics Data System (ADS)

Ikhmayies, Shadia J.; Zbib, Mohamad B.

2017-07-01

Zinc oxide (ZnO) is an important transparent conducting oxide of potential use in solar cells, electronics, photoelectronics, and sensors. In this work ZnO micro discs were synthesized in thin film form on glass substrates using the low cost spray pyrolysis method. The films were prepared from a precursor solution of ZnCl2 in distilled water at a substrate temperature of 300 ± 5°C. The as-synthesized samples were analyzed with x-ray diffraction, scanning electron microscopy, and x-ray energy dispersive spectroscopy (EDS). The morphology of the films showed randomly distributed micro discs of hexagonal shape. The EDS reports showed that the films contained Cl and Fe. Size analysis was performed using ImageJ software, where the average diameter was found to be 4.8 ± 0.9 μm, and the average thickness was found to be 254 ± 43 nm.

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

PubMed Central

Chen, Jiawen; Li, Jianhua; Li, Yiyuan; Chen, Yulong

2018-01-01

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. PMID:29494477

Solar micro-power system for self-powered wireless sensor nodes

NASA Astrophysics Data System (ADS)

He, Yongtai; Li, Yangqiu; Liu, Lihui; Wang, Lei

2008-10-01

In self-powered wireless sensor nodes, the efficiency for environmental energy harvesting, storage and management determines the lifetime and environmental adaptability of the sensor nodes. However, the method of improving output efficiency for traditional photovoltaic power generation is not suitable for a solar micro-power system due to the special requirements for its application. This paper presents a solar micro-power system designed for a solar self-powered wireless sensor node. The Maximum Power Point Tracking (MPPT) of solar cells and energy storage are realized by the hybrid energy storage structure and "window" control. Meanwhile, the mathematical model of energy harvesting, storing and management is formulated. In the novel system, the output conversion efficiency of solar cells is 12%.

Sensing of single electrons using micro and nano technologies: a review

NASA Astrophysics Data System (ADS)

Jalil, Jubayer; Zhu, Yong; Ekanayake, Chandima; Ruan, Yong

2017-04-01

During the last three decades, the remarkable dynamic features of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS), and advances in solid-state electronics hold much potential for the fabrication of extremely sensitive charge sensors. These sensors have a broad range of applications, such as those involving the measurement of ionization radiation, detection of bio-analyte and aerosol particles, mass spectrometry, scanning tunneling microscopy, and quantum computation. Designing charge sensors (also known as charge electrometers) for electrometry is deemed significant because of the sensitivity and resolution issues in the range of micro- and nano-scales. This article reviews the development of state-of-the-art micro- and nano-charge sensors, and discusses their technological challenges for practical implementation.

Time-domain fiber loop ringdown sensor and sensor network

NASA Astrophysics Data System (ADS)

Kaya, Malik

Optical fibers have been mostly used in fiber optic communications, imaging optics, sensing technology, etc. Fiber optic sensors have gained increasing attention for scientific and structural health monitoring (SHM) applications. In this study, fiber loop ringdown (FLRD) sensors were fabricated for scientific, SHM, and sensor networking applications. FLRD biosensors were fabricated for both bulk refractive index (RI)- and surface RI-based DNA sensing and one type of bacteria sensing. Furthermore, the effect of glucose oxidase (GOD) immobilization at the sensor head on sensor performance was evaluated for both glucose and synthetic urine solutions with glucose concentration between 0.1% and 10%. Detection sensitivities of the glucose sensors were achieved as low as 0.05%. For chemical sensing, heavy water, ranging from 97% to 10%, and several elemental solutions were monitored by using the FLRD chemical sensors. Bulk index-based FLRD sensing showed that trace elements can be detected in deionized water. For physical sensing, water and cracking sensors were fabricated and embedded into concrete. A partially-etched single-mode fiber (SMF) was embedded into a concrete bar for water monitoring while a bare SMF without any treatment was directly embedded into another concrete bar for monitoring cracks. Furthermore, detection sensitivities of water and crack sensors were investigated as 10 ml water and 0.5 mm surface crack width, respectively. Additionally fiber loop ringdown-fiber Bragg grating temperature sensors were developed in the laboratory; two sensor units for water, crack, and temperature sensing were deployed into a concrete cube in a US Department of Energy test bed (Miami, FL). Multi-sensor applications in a real concrete structure were accomplished by testing the six FLRD sensors. As a final stage, a sensor network was assembled by multiplexing two or three FLRD sensors in series and parallel. Additionally, two FLRD sensors were combined in series and parallel by using a 2x1 micro-electromechanical system optical switch to control sensors individually. For both configurations, contributions of each sensor to two or three coupled signals were simulated theoretically. Results show that numerous FLRD sensors can be connected in different configurations, and a sensor network can be built up for multi-function sensing applications.

An ultrahigh-accuracy Miniature Dew Point Sensor based on an Integrated Photonics Platform

PubMed Central

Tao, Jifang; Luo, Yu; Wang, Li; Cai, Hong; Sun, Tao; Song, Junfeng; Liu, Hui; Gu, Yuandong

2016-01-01

The dew point is the temperature at which vapour begins to condense out of the gaseous phase. The deterministic relationship between the dew point and humidity is the basis for the industry-standard “chilled-mirror” dew point hygrometers used for highly accurate humidity measurements, which are essential for a broad range of industrial and metrological applications. However, these instruments have several limitations, such as high cost, large size and slow response. In this report, we demonstrate a compact, integrated photonic dew point sensor (DPS) that features high accuracy, a small footprint, and fast response. The fundamental component of this DPS is a partially exposed photonic micro-ring resonator, which serves two functions simultaneously: 1) sensing the condensed water droplets via evanescent fields and 2) functioning as a highly accurate, in situ temperature sensor based on the thermo-optic effect (TOE). This device virtually eliminates most of the temperature-related errors that affect conventional “chilled-mirror” hygrometers. Moreover, this DPS outperforms conventional “chilled-mirror” hygrometers with respect to size, cost and response time, paving the way for on-chip dew point detection and extension to applications for which the conventional technology is unsuitable because of size, cost, and other constraints. PMID:27417734

Micro-satellite for space debris observation by optical sensors

NASA Astrophysics Data System (ADS)

Thillot, Marc; Brenière, Xavier; Midavaine, Thierry

2017-11-01

The purpose of this theoretical study carried out under CNES contract is to analyze the feasibility of small space debris detection and classification with an optical sensor on-board micro-satellite. Technical solutions based on active and passive sensors are analyzed and compared. For the most appropriated concept an optimization was made and theoretical performances in terms of number of detection versus class of diameter were calculated. Finally we give some preliminary physical sensor features to illustrate the concept (weight, volume, consumption,…).

Gold Nanoparticle Chemiresistor Arrays for Micro-Gas Chromatography Applications

NASA Astrophysics Data System (ADS)

Covington, Elizabeth Laura

Thiolate-monolayer-protected gold nanoparticle (MPN) chemiresistors were studied as the sensing devices for micro-gas chromatography (microGC) systems. Because transport through chemiresistors is dominated by tunneling, they are highly sensitive. In order to improve their limit of detection, their fundamental noise was studied. Chemiresistors exhibit 1/f type noise where noise scales inversely with frequency. Chemiresistor noise was found to scale inversely with MPN film thickness. We lowered the noise prefactor of a 50x60 microm2 chemiresistor by coating a thick rather than monolayer MPN film. Electron beam induced crosslinking (EBIX) of the MPN film slightly reduced chemiresistor noise. A technique for patterning chemiresistor arrays with MPN films using EBIX was developed, and an array with four distinct MPNs was fabricated in an area ˜600 microm 2. This is the smallest chemiresistor array reported to date. Chemiresistors were exposed to vapors and provided differential sensitivities comparable to those from larger uncrosslinked chemiresistors. Chemiresistors were studied to assess their long term stability. Chemiresistors exhibited decreases in resistance over time that is likely caused by loss of MPN ligands. Temperature dependent current-voltage measurements verified the resistance change was not due to changes in the size of the MPN core. While resistance could change by orders of magnitude, vapor sensitivity did not show significant changes. Heating increased the change in resistance, but chemiresistors remained responsive after being held at 80°C for a cumulative 400 hours. It was unknown whether tunneling in the MPN film is through the highest unoccupied molecular orbital (HOMO) or lowest unoccupied molecular orbital (LUMO). A new technique was explored to distinguish tunneling through the HOMO and LUMO by measuring the induced thermoelectric voltage caused by a temperature difference across the MPN film. For integration into a microGC system, we fabricated a chemiresistor array on the surface of a 2.2x2.2 mm2readout circuitry chip creating a monolithic sensor system. A model for determining the optimal sensor size for a microGC system is presented. While noise is inversely proportional to chemiresistor volume, the amount of analyte detectable is proportional to volume making smaller chemiresistors able to detect lesser amounts of analyte.

High accuracy thermal conductivity measurement of aqueous cryoprotective agents and semi-rigid biological tissues using a microfabricated thermal sensor

PubMed Central

Liang, Xin M.; Sekar, Praveen K.; Zhao, Gang; Zhou, Xiaoming; Shu, Zhiquan; Huang, Zhongping; Ding, Weiping; Zhang, Qingchuan; Gao, Dayong

2015-01-01

An improved thermal-needle approach for accurate and fast measurement of thermal conductivity of aqueous and soft biomaterials was developed using microfabricated thermal conductivity sensors. This microscopic measuring device was comprehensively characterized at temperatures from 0 °C to 40 °C. Despite the previous belief, system calibration constant was observed to be highly temperature-dependent. Dynamic thermal conductivity response during cooling (40 °C to –40 °C) was observed using the miniaturized single tip sensor for various concentrations of CPAs, i.e., glycerol, ethylene glycol and dimethyl sulfoxide. Chicken breast, chicken skin, porcine limb, and bovine liver were assayed to investigate the effect of anatomical heterogeneity on thermal conductivity using the arrayed multi-tip sensor at 20 °C. Experimental results revealed distinctive differences in localized thermal conductivity, which suggests the use of approximated or constant property values is expected to bring about results with largely inflated uncertainties when investigating bio-heat transfer mechanisms and/or performing sophisticated thermal modeling with complex biological tissues. Overall, the presented micro thermal sensor with automated data analysis algorithm is a promising approach for direct thermal conductivity measurement of aqueous solutions and soft biomaterials and is of great value to cryopreservation of tissues, hyperthermia or cryogenic, and other thermal-based clinical diagnostics and treatments. PMID:25993037

High accuracy thermal conductivity measurement of aqueous cryoprotective agents and semi-rigid biological tissues using a microfabricated thermal sensor

NASA Astrophysics Data System (ADS)

Liang, Xin M.; Sekar, Praveen K.; Zhao, Gang; Zhou, Xiaoming; Shu, Zhiquan; Huang, Zhongping; Ding, Weiping; Zhang, Qingchuan; Gao, Dayong

2015-05-01

An improved thermal-needle approach for accurate and fast measurement of thermal conductivity of aqueous and soft biomaterials was developed using microfabricated thermal conductivity sensors. This microscopic measuring device was comprehensively characterized at temperatures from 0 °C to 40 °C. Despite the previous belief, system calibration constant was observed to be highly temperature-dependent. Dynamic thermal conductivity response during cooling (40 °C to -40 °C) was observed using the miniaturized single tip sensor for various concentrations of CPAs, i.e., glycerol, ethylene glycol and dimethyl sulfoxide. Chicken breast, chicken skin, porcine limb, and bovine liver were assayed to investigate the effect of anatomical heterogeneity on thermal conductivity using the arrayed multi-tip sensor at 20 °C. Experimental results revealed distinctive differences in localized thermal conductivity, which suggests the use of approximated or constant property values is expected to bring about results with largely inflated uncertainties when investigating bio-heat transfer mechanisms and/or performing sophisticated thermal modeling with complex biological tissues. Overall, the presented micro thermal sensor with automated data analysis algorithm is a promising approach for direct thermal conductivity measurement of aqueous solutions and soft biomaterials and is of great value to cryopreservation of tissues, hyperthermia or cryogenic, and other thermal-based clinical diagnostics and treatments.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Joe, Paul; Scott, Bill; Doyle, Chris

Abstract—An innovative monitoring network was implemented to support the operational and science programs for the Vancouver 2010 Winter Olympics. It consisted of in situ weather stations on custom-designed platforms. The sensors included an HMP45C for temperature, humidity and pressure, a tipping bucket rain gauge, an acoustic snow depth sensor, a Pluvio 1 precipitation gauge and an anemometer placed at gauge height and at 10 m height. Modifications to commercial automated precipitation gauges were necessary for the heavy snowfall conditions. Advanced or emerging technologies were deployed to support scientific and nowcasting studies into precipitation intensity, typing, visibility and wind. The sensorsmore » included an FD12P visibility and precipitation sensor, a precipitation occurrence sensing system (POSS) present weather sensor, a Hotplate precipitation sensor and a Parsivel disdrometer. Data were collected at 1 min sampling intervals. A Doppler weather radar was deployed in a valley location and provided critical detailed low-level data. An X-band dual-polarized radar was deployed by the National Oceanic and Atmospheric Administration to monitor Vancouver and Cypress Mountain. Three remote sensing stations for vertical profiling were established. At the base of Whistler Mountain, a micro-rain radar, a 22-channel radiometer, a ceilometer, a Parsivel and a POSS were installed. At the base of Cypress Mountain, a micro-rain radar, a ceilometer, a low cost rain sensor (LCR by ATTEX) and a POSS were installed. At Squamish, a wind profiler and a POSS were installed. Weather sensors were mounted on the Whistler Village Gondola and on the Peak to Peak gondola. Sites were established along the Whistler Mountain slope and at other key locations. The combination of sites and instruments formed a comprehensive network to provide observations appropriate for nowcasting in winter complex terrain and investigate precipitation, visibility and wind processes. The contribution provides a detailed description of the network, their sensors, the innovations and some examples.« less

Micro-Pressure Sensors for Future Mars Missions

NASA Technical Reports Server (NTRS)

Catling, David C.

1996-01-01

The joint research interchange effort was directed at the following principal areas: u further development of NASA-Ames' Mars Micro-meteorology mission concept as a viable NASA space mission especially with regard to the science and instrument specifications u interaction with the flight team from NASA's New Millennium 'Deep-Space 2' (DS-2) mission with regard to selection and design of micro-pressure sensors for Mars u further development of micro-pressure sensors suitable for Mars The research work undertaken in the course of the Joint Research Interchange should be placed in the context of an ongoing planetary exploration objective to characterize the climate system on Mars. In particular, a network of small probes globally-distributed on the surface of the planet has often been cited as the only way to address this particular science goal. A team from NASA Ames has proposed such a mission called the Micrometeorology mission, or 'Micro-met' for short. Surface pressure data are all that are required, in principle, to calculate the Martian atmospheric circulation, provided that simultaneous orbital measurements of the atmosphere are also obtained. Consequently, in the proposed Micro-met mission a large number of landers would measure barometric pressure at various locations around Mars, each equipped with a micro-pressure sensor. Much of the time on the JRI was therefore spent working with the engineers and scientists concerned with Micro-met to develop this particular mission concept into a more realistic proposition.

Fabrication of a Miniature Multi-Parameter Sensor Chip for Water Quality Assessment.

PubMed

Zhou, Bo; Bian, Chao; Tong, Jianhua; Xia, Shanhong

2017-01-14

Water contamination is a main inducement of human diseases. It is an important step to monitor the water quality in the water distribution system. Due to the features of large size, high cost, and complicated structure of traditional water determination sensors and devices, it is difficult to realize real-time water monitoring on a large scale. In this paper, we present a multi-parameter sensor chip, which is miniature, low-cost, and robust, to detect the pH, conductivity, and temperature of water simultaneously. The sensor chip was fabricated using micro-electro-mechanical system (MEMS) techniques. Iridium oxide film was electrodeposited as the pH-sensing material. The atomic ratio of Ir(III) to Ir(IV) is about 1.38 according to the X-ray photoelectron spectroscopy (XPS) analysis. The pH sensing electrode showed super-Nernstian response (-67.60 mV/pH) and good linearity (R² = 0.9997), in the range of pH 2.22 to pH 11.81. KCl-agar and epoxy were used as the electrolyte layer and liquid junction for the solid-state reference electrode, respectively, and its potential stability in deionized water was 56 h. The conductivity cell exhibited a linear determination range from 21.43 μ S / cm to 1.99 mS / cm , and the electrode constant was 1.566 cm -1 . Sensitivity of the temperature sensor was 5.46 Ω / ° C . The results indicate that the developed sensor chip has potential application in water quality measurements.

The selectable hyperspectral airborne remote sensing kit (SHARK) as an enabler for precision agriculture

NASA Astrophysics Data System (ADS)

Holasek, Rick; Nakanishi, Keith; Ziph-Schatzberg, Leah; Santman, Jeff; Woodman, Patrick; Zacaroli, Richard; Wiggins, Richard

2017-04-01

Hyperspectral imaging (HSI) has been used for over two decades in laboratory research, academic, environmental and defense applications. In more recent time, HSI has started to be adopted for commercial applications in machine vision, conservation, resource exploration, and precision agriculture, to name just a few of the economically viable uses for the technology. Corning Incorporated (Corning) has been developing and manufacturing HSI sensors, sensor systems, and sensor optical engines, as well as HSI sensor components such as gratings and slits for over a decade and a half. This depth of experience and technological breadth has allowed Corning to design and develop unique HSI spectrometers with an unprecedented combination of high performance, low cost and low Size, Weight, and Power (SWaP). These sensors and sensor systems are offered with wavelength coverage ranges from the visible to the Long Wave Infrared (LWIR). The extremely low SWaP of Corning's HSI sensors and sensor systems enables their deployment using limited payload platforms such as small unmanned aerial vehicles (UAVs). This paper discusses use of the Corning patented monolithic design Offner spectrometer, the microHSI™, to build a highly compact 400-1000 nm HSI sensor in combination with a small Inertial Navigation System (INS) and micro-computer to make a complete turn-key airborne remote sensing payload. This Selectable Hyperspectral Airborne Remote sensing Kit (SHARK) has industry leading SWaP (1.5 lbs) at a disruptively low price due, in large part, to Corning's ability to manufacture the monolithic spectrometer out of polymers (i.e. plastic) and therefore reduce manufacturing costs considerably. The other factor in lowering costs is Corning's well established in house manufacturing capability in optical components and sensors that further enable cost-effective fabrication. The competitive SWaP and low cost of the microHSI™ sensor is approaching, and in some cases less than the price point of Multi Spectral Imaging (MSI) sensors. Specific designs of the Corning microHSI™ SHARK visNIR turn-key system are presented along with salient performance characteristics. Initial focus market areas include precision agriculture and historic and recent microHSI™ SHARK prototype test results are presented.

Silicon micro sensors as integrated readout platform for colorimetric and fluorescence based opto-chemical transducers

NASA Astrophysics Data System (ADS)

Will, Matthias; Martan, Tomas; Brodersen, Olaf

2011-09-01

Opto-chemical transducer almost offers unlimited possibilities for detection of physical quantities. New technologies and research show a steady increasing of publications in the area of sensoric principles. For transfer to real world applications the optical response has to be converted into an electrical signal. An exceptional opto chemical transducer loses the attraction if complex and expensive instruments for analysis are requires. Therefore, the readout system must be very compact and producible for low cost. In this presentation, the technology platform as a solution for these problems will be presented. We combine micro structuring of silicon, photodiode fabrication, chip in chip mounting and novel assembly technologies for creation of a flexible sensor platform. This flexible combination of technologies allows fabricating a family of planar optical remission sensors. With variation of design and modifications, we are able to detect colorimetric, fluorescent properties of an sensitive layer attached on the sensor surface. In our sensor with typical size of 6mm x 6mm x 1mm different emitting sources based on LED's or laser diodes, multiple detection cannels for the remitted light and also measurement of temperature are included. Based on these sensors we proof the concept by demonstrating sensors for oxygen, carbon dioxide and ammonia based on colorimetric and fluorescent changes in the transducer layer. In both configurations, LED's irradiated the sensitive polymer layer through a transparent substrate. The absorption or fluorescence properties of dyed polymer are changed by the chemical reaction and light response is detected by PIN diodes. The signal shift is analyzed by using a computer controlled evaluation board of own construction. Accuracy and reliability of the remission sensor system were verified and the whole sensor system was experimentally tested in the range of concentrations from 50 ppm up to 100 000 ppm for CO2 and O2 Furthermore, we develop concepts to use the sensor also for interferometric detection of layer properties and the combination with capacitive structures on the surface. This allows detecting of thickness or refractive index variation of layers in future.

Oximeter reliability in a subzero environment.

PubMed

Macnab, A J; Smith, M; Phillips, N; Smart, P

1996-11-01

Pulse oximeters optimize care in the pre-hospital setting. As British Columbia ambulance teams often provide care in subzero temperatures, we conducted a study to determine the reliability of 3 commercially-available portable oximeters in a subzero environment. We hypothesized that there is no significant difference between SaO2 readings obtained using a pulse oximeter at room temperature and a pulse oximeter operating at sub-zero temperatures. Subjects were stable normothermic children in intensive care on Hewlett Packard monitors (control unit) at room temperature. The test units were packed in dry ice in an insulated bin (temperature - 15 degrees C to -30 degrees C) and their sensors placed on the subjects, contralateral to the control sensors. Data were collected simultaneously from test and control units immediately following validation of control unit values by co-oximetry (blood gas). No data were unacceptable. Two units (Propaq 106EC and Nonin 8500N) functioned well to < -15 degrees C, providing data comparable to those obtained from the control unit (p < 0.001). The Siemens Micro O2 did not function at the temperatures tested. Monitor users who require equipment to function in subzero environments (military, Coast Guard, Mountain Rescue) should ensure that function is reliable, and could test units using this method.

A new amperometric nanostructured sensor for the analytical determination of hydrogen peroxide.

PubMed

Guascito, M R; Filippo, E; Malitesta, C; Manno, D; Serra, A; Turco, A

2008-12-01

A new amperometric, nanostructured sensor for the analytical determination of hydrogen peroxide is proposed. This sensor was constructed by immobilizing silver nanoparticles in a polyvinyl alcohol (PVA) film on a platinum electrode, which was performed by direct drop-casting silver nanoparticles that were capped in a PVA colloidal suspension. UV-vis spectroscopy, X-ray diffraction and transmission electron microscopy were used to give a complete characterization of the nanostructured film. Cyclic voltammetry experiments yielded evidence that silver nanoparticles facilitate hydrogen peroxide reduction, showing excellent catalytic activity. Moreover, the cronoamperometric response of modified sensors was dependent on nanoparticle lifetime. Experiments were performed, using freshly prepared solutions, after 4 and 8 days. Results concerning the quantitative analysis of hydrogen peroxide, in terms of detection limit, linear range, sensitivity and standard deviation (STD), are discussed for each tested sensor type. Utilization of two different linear ranges (40 microM to 6mM and 1.25 microM to 1.0mM) enabled the assessment of concentration intervals having up to three orders of magnitude. Moreover, the electrode made using a 4-day-old solution showed the maximal sensitivity of 128 nA microM(-1)(4090 nA microM(-1)cm(-2)), yielding a limit of detection of 1 microuM and STD of 2.5 microAmM(-1). All of these analytical parameters make the constructed sensors suitable for peroxide determination in aqueous solution.

NASA Tech Briefs, July 2007

NASA Technical Reports Server (NTRS)

2007-01-01

Topics covered include: Miniature Intelligent Sensor Module; "Smart" Sensor Module; Portable Apparatus for Electrochemical Sensing of Ethylene; Increasing Linear Dynamic Range of a CMOS Image Sensor; Flight Qualified Micro Sun Sensor; Norbornene-Based Polymer Electrolytes for Lithium Cells; Making Single-Source Precursors of Ternary Semiconductors; Water-Free Proton-Conducting Membranes for Fuel Cells; Mo/Ti Diffusion Bonding for Making Thermoelectric Devices; Photodetectors on Coronagraph Mask for Pointing Control; High-Energy-Density, Low-Temperature Li/CFx Primary Cells; G4-FETs as Universal and Programmable Logic Gates; Fabrication of Buried Nanochannels From Nanowire Patterns; Diamond Smoothing Tools; Infrared Imaging System for Studying Brain Function; Rarefying Spectra of Whispering-Gallery-Mode Resonators; Large-Area Permanent-Magnet ECR Plasma Source; Slot-Antenna/Permanent-Magnet Device for Generating Plasma; Fiber-Optic Strain Gauge With High Resolution And Update Rate; Broadband Achromatic Telecentric Lens; Temperature-Corrected Model of Turbulence in Hot Jet Flows; Enhanced Elliptic Grid Generation; Automated Knowledge Discovery From Simulators; Electro-Optical Modulator Bias Control Using Bipolar Pulses; Generative Representations for Automated Design of Robots; Mars-Approach Navigation Using In Situ Orbiters; Efficient Optimization of Low-Thrust Spacecraft Trajectories; Cylindrical Asymmetrical Capacitors for Use in Outer Space; Protecting Against Faults in JPL Spacecraft; Algorithm Optimally Allocates Actuation of a Spacecraft; and Radar Interferometer for Topographic Mapping of Glaciers and Ice Sheets.

A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations

PubMed Central

Chen, Lianhong; Sun, Zhenyuan; Li, Guanglei; Chen, Deyong; Wang, Junbo

2018-01-01

A monolithic electrochemical micro seismic sensor capable of monitoring three-axial vibrations was proposed in this paper. The proposed micro sensor mainly consisted of four sensing units interconnected within flow channels and by interpreting the voltage outputs of the sensing units, vibrations with arbitrary directions can be quantified. The proposed seismic sensors are fabricated based on MEMS technologies and characterized, which produced sensitivities along x, y, and z axes as 2473.2 ± 184.5 V/(m/s), 2261.7 ± 119.6 V/(m/s), and 3480.7 ± 417.2 V/(m/s) at 30 Hz. In addition, the vibrations in x-y, x-z, and y-z planes were applied to the developed seismic sensors, leading to comparable monitoring results after decoupling calculations with the input velocities. Furthermore, the results have shown its feasibilities for seismic data recording. PMID:29614720

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

NASA Astrophysics Data System (ADS)

Nogami, Hirofumi; Kobayashi, Takeshi; Okada, Hironao; Masuda, Takashi; Maeda, Ryutaro; Itoh, Toshihiro

2012-09-01

An animal health monitoring system and a wireless sensor node aimed at preventing the spread of animal-transmitted diseases and improving pastoral efficiency which are especially suitable for chickens, were developed. The sensor node uses a piezoelectric microelectromechanical system (MEMS) device and an event-driven system that is activated by the movements of a chicken. The piezoelectric MEMS device has two functions: a) it measures the activity of a chicken and b) switches the micro-control unit (MCU) of the wireless sensor node from the sleep mode. The piezoelectric MEMS device is required to produce high output voltages when the chicken moves. However, after the piezoelectric MEMS device was reflowed to the wireless sensor node, the output voltages of the piezoelectric MEMS device decreased. The main reason for this might be the loss of residual polarization, which is affected by the thermal load during the reflow process. After the reflow process, we were not able to apply a voltage to the piezoelectric MEMS device; thus, the piezoelectric output voltage was not increased by repoling the piezoelectric MEMS device. To address the thermal load of the reflow process, we established a thermal poling treatment, which achieves a higher temperature than the reflow process. We found that on increasing the thermal poling temperature, the piezoelectric output voltages did not decreased low significantly. Thus, we considered that a thermal poling temperature higher than that of the reflow process prevents the piezoelectric output voltage reduction caused by the thermal load.

Development of optical MEMS CO2 sensors

NASA Astrophysics Data System (ADS)

McNeal, Mark P.; Moelders, Nicholas; Pralle, Martin U.; Puscasu, Irina; Last, Lisa; Ho, William; Greenwald, Anton C.; Daly, James T.; Johnson, Edward A.; George, Thomas

2002-09-01

Inexpensive optical MEMS gas and chemical sensors offer chip-level solutions to environmental monitoring, industrial health and safety, indoor air quality, and automobile exhaust emissions monitoring. Previously, Ion Optics, Inc. reported on a new design concept exploiting Si-based suspended micro-bridge structures. The devices are fabricated using conventional CMOS compatible processes. The use of photonic bandgap (PBG) crystals enables narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning was accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 micrometers wavelength range. Prototype designs explored suspension architectures and filament geometries. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO2 gas sensitivity limits are reported.

Metallic Bead Detection by Using Eddy-Current Probe with SV-GMR Sensor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yamada, S.; Chomsuwan, K.; Hagino, T.

2005-04-09

The progress of the ECT probe with micro magnetic sensor becomes possible to apply to various applications. The detection of micro metallic bead used for electric packaging has been reported in this paper. We proposed micro ECT probes with meander coil as exciter and spin-valve giant magneto-resistance (SV-GMR) as receiver. Micro metallic bead(solder ball) with the diameter of 0.25 to 0.76 mm is used as a measuring object. We discuss the detection and alignment of metallic bead by using ECT technique.

Measurement of Gas-Liquid Two-Phase Flow in Micro-Pipes by a Capacitance Sensor

PubMed Central

Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing

2014-01-01

A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes. PMID:25587879

Measurement of gas-liquid two-phase flow in micro-pipes by a capacitance sensor.

PubMed

Ji, Haifeng; Li, Huajun; Huang, Zhiyao; Wang, Baoliang; Li, Haiqing

2014-11-26

A capacitance measurement system is developed for the measurement of gas-liquid two-phase flow in glass micro-pipes with inner diameters of 3.96, 2.65 and 1.56 mm, respectively. As a typical flow regime in a micro-pipe two-phase flow system, slug flow is chosen for this investigation. A capacitance sensor is designed and a high-resolution and high-speed capacitance measurement circuit is used to measure the small capacitance signals based on the differential sampling method. The performance and feasibility of the capacitance method are investigated and discussed. The capacitance signal is analyzed, which can reflect the voidage variation of two-phase flow. The gas slug velocity is determined through a cross-correlation technique using two identical capacitance sensors. The simulation and experimental results show that the presented capacitance measurement system is successful. Research work also verifies that the capacitance sensor is an effective method for the measurement of gas liquid two-phase flow parameters in micro-pipes.

Integrated thin film Si fluorescence sensor coupled with a GaN microLED for microfluidic point-of-care testing

NASA Astrophysics Data System (ADS)

Robbins, Hannah; Sumitomo, Keiko; Tsujimura, Noriyuki; Kamei, Toshihiro

2018-02-01

An integrated fluorescence sensor consisting of a SiO2/Ta2O5 multilayer optical interference filter and hydrogenated amorphous silicon (a-Si:H) pin photodiode was coupled with a GaN microLED to construct a compact fluorescence detection module for point-of-care microfluidic biochemical analysis. The combination of the small size of the GaN microLED and asymmetric microlens resulted in a focal spot diameter of the excitation light of approximately 200 µm. The limit of detection of the sensor was as high as 36 nM for fluorescein solution flowing in a 100 µm deep microfluidic channel because of the lack of directionality of the LED light. Nevertheless, we used the GaN microLED coupled with the a-Si:H fluorescence sensor to successfully detect fluorescence from a streptavidin R-phycoerythrin conjugate that bound to biotinylated antibody-coated microbeads trapped by the barrier in the microfluidic channel.

Measuring Micro-Friction Torque in MEMS Gas Bearings

PubMed Central

Fang, Xudong; Liu, Huan

2016-01-01

An in situ measurement of micro-friction torque in MEMS gas bearings, which has been a challenging research topic for years, is realized by a system designed in this paper. In the system, a high accuracy micro-force sensor and an electronically-driven table are designed, fabricated and utilized. With appropriate installation of the sensor and bearings on the table, the engine rotor can be driven to rotate with the sensor using a silicon lever beam. One end of the beam is fixed to the shaft of the gas bearing, while the other end is free and in contact with the sensor probe tip. When the sensor begins to rotate with the table, the beam is pushed by the sensor probe to rotate in the same direction. For the beam, the friction torque from the gas bearing is balanced by the torque induced by pushing force from the sensor probe. Thus, the friction torque can be calculated as a product of the pushing force measured by the sensor and the lever arm, which is defined as the distance from the sensor probe tip to the centerline of the bearing. Experimental results demonstrate the feasibility of this system, with a sensitivity of 1.285 mV/μN·m in a range of 0 to 11.76 μN·m when the lever arm is 20 mm long. The measuring range can be modified by varying the length of the lever arm. Thus, this system has wide potential applications in measuring the micro-friction torque of gas bearings in rotating MEMS machines. PMID:27213377

Biocompatible circuit-breaker chip for thermal management of biomedical microsystems

NASA Astrophysics Data System (ADS)

Luo, Yi; Dahmardeh, Masoud; Takahata, Kenichi

2015-05-01

This paper presents a thermoresponsive micro circuit breaker for biomedical applications specifically targeted at electronic intelligent implants. The circuit breaker is micromachined to have a shape-memory-alloy cantilever actuator as a normally closed temperature-sensitive switch to protect the device of interest from overheating, a critical safety feature for smart implants including those that are electrothermally driven with wireless micro heaters. The device is fabricated in a size of 1.5  ×  2.0  ×  0.46 mm3 using biocompatible materials and a chip-based titanium package, exhibiting a nominal cold-state resistance of 14 Ω. The breaker rapidly enters the full open condition when the chip temperature exceeds 63 °C, temporarily breaking the circuit of interest to lower its temperature until chip temperature drops to 51 °C, at which the breaker closes the circuit to allow current to flow through it again, physically limiting the maximum temperature of the circuit. This functionality is tested in combination with a wireless resonant heater powered by radio-frequency electromagnetic radiation, demonstrating self-regulation of heater temperature. The developed circuit-breaker chip operates in a fully passive manner that removes the need for active sensor and circuitry to achieve temperature regulation in a target device, contributing to the miniaturization of biomedical microsystems including electronic smart implants where thermal management is essential.

A micro-Doppler sonar for acoustic surveillance in sensor networks

NASA Astrophysics Data System (ADS)

Zhang, Zhaonian

Wireless sensor networks have been employed in a wide variety of applications, despite the limited energy and communication resources at each sensor node. Low power custom VLSI chips implementing passive acoustic sensing algorithms have been successfully integrated into an acoustic surveillance unit and demonstrated for detection and location of sound sources. In this dissertation, I explore active and passive acoustic sensing techniques, signal processing and classification algorithms for detection and classification in a multinodal sensor network environment. I will present the design and characterization of a continuous-wave micro-Doppler sonar to image objects with articulated moving components. As an example application for this system, we use it to image gaits of humans and four-legged animals. I will present the micro-Doppler gait signatures of a walking person, a dog and a horse. I will discuss the resolution and range of this micro-Doppler sonar and use experimental results to support the theoretical analyses. In order to reduce the data rate and make the system amenable to wireless sensor networks, I will present a second micro-Doppler sonar that uses bandpass sampling for data acquisition. Speech recognition algorithms are explored for biometric identifications from one's gait, and I will present and compare the classification performance of the two systems. The acoustic micro-Doppler sonar design and biometric identification results are the first in the field as the previous work used either video camera or microwave technology. I will also review bearing estimation algorithms and present results of applying these algorithms for bearing estimation and tracking of moving vehicles. Another major source of the power consumption at each sensor node is the wireless interface. To address the need of low power communications in a wireless sensor network, I will also discuss the design and implementation of ultra wideband transmitters in a three dimensional silicon on insulator process. Lastly, a prototype of neuromorphic interconnects using ultra wideband radio will be presented.

Conductivity for soot sensing: possibilities and limitations.

PubMed

Grob, Benedikt; Schmid, Johannes; Ivleva, Natalia P; Niessner, Reinhard

2012-04-17

In this study we summarize the possibilities and limitations of a conductometric measurement principle for soot sensing. The electrical conductivity of different carbon blacks (FW 200, lamp black 101, Printex 30, Printex U, Printex XE2, special black 4, and special black 6), spark discharge soot (GfG), and graphite powder was measured by a van der Pauw arrangement. Additionally the influence of inorganic admixtures on the conductivity of carbonaceous materials was proven to follow the percolation theory. Structural and oxidation characteristics obtained with Raman microspectroscopy and temperature programmed oxidation, respectively, were correlated with the electrical conductivity data. Moreover, a thermophoretic precipitator has been applied to deposit soot particles from the exhaust stream between interdigital electrodes. This combines a controlled and size independent particle collection method with the conductivity measurement principle. A test vehicle was equipped with the AVL Micro Soot Sensor (photoacoustic soot sensor) to prove the conductometric sensor principle with an independent and reliable technique. Our results demonstrate promising potential of the conductometric sensor for on-board particle diagnostic. Furthermore this sensor can be applied as a simple, rapid, and cheap analytical tool for characterization of soot structure.

Interfacing Issues in Microcooling of Optical Detectors in Space Applications

NASA Astrophysics Data System (ADS)

Derking, J. H.; ter Brake, H. J. M.; Linder, M.; Rogalla, H.

2010-04-01

Miniature Joule-Thomson coolers were developed at the University of Twente and are able to cool to 100 K with a typical cooling power of 10 to 20 mW. These coolers have a high potential for space applications in cooling small optical detectors for future earth observation and science missions. Under contract of the European Space Agency, we investigate on-chip detector cooling for the temperature range 70 K-250 K. To identify the detectors that can be cooled by a JT microcooler, a literature survey was performed. Following this survey, we selected a micro digital CMOS image sensor. A conceptual design of this cooler-sensor system is made. Among various techniques, indium soldering and silver paint are chosen for the bonding of the silicon sensor to the glass microcooler. Electrical connections from the sensor to the outside will be realized by structuring them in a thin layer of gold that is sputtered on the outside of the cooler to minimize the radiative heat load. For the electrical connections between the sensor and the structured leads, aluminum or gold bond wires will be used.

IMAPS Device Packaging Conference 2017 - Engineered Micro Systems & Devices Track

NASA Technical Reports Server (NTRS)

Varnavas, Kosta

2017-01-01

NASA field center Marshall Space Flight Center (Huntsville, AL), has invested in advanced wireless sensor technology development. Developments for a wireless microcontroller back-end were primarily focused on the commercial Synapse Wireless family of devices. These devices have many useful features for NASA applications, good characteristics and the ability to be programmed Over-The-Air (OTA). The effort has focused on two widely used sensor types, mechanical strain gauges and thermal sensors. Mechanical strain gauges are used extensively in NASA structural testing and even on vehicle instrumentation systems. Additionally, thermal monitoring with many types of sensors is extensively used. These thermal sensors include thermocouples of all types, resistive temperature devices (RTDs), diodes and other thermal sensor types. The wireless thermal board will accommodate all of these types of sensor inputs to an analog front end. The analog front end on each of the sensors interfaces to the Synapse wireless microcontroller, based on the Atmel Atmega128 device. Once the analog sensor output data is digitized by the onboard analog to digital converter (A/D), the data is available for analysis, computation or transmission. Various hardware features allow custom embedded software to manage battery power to enhance battery life. This technology development fits nicely into using numerous additional sensor front ends, including some of the low-cost printed circuit board capacitive moisture content sensors currently being developed at Auburn University.

A highly sensitive room temperature H2S gas sensor based on SnO2 multi-tube arrays bio-templated from insect bristles.

PubMed

Tian, Junlong; Pan, Feng; Xue, Ruiyang; Zhang, Wang; Fang, Xiaotian; Liu, Qinglei; Wang, Yuhua; Zhang, Zhijian; Zhang, Di

2015-05-07

A tin oxide multi-tube array (SMTA) with a parallel effect was fabricated through a simple and promising method combining chemosynthesis and biomimetic techniques; a biomimetic template was derived from the bristles on the wings of the Alpine Black Swallowtail butterfly (Papilio maackii). SnO2 tubes are hollow and porous structures with micro-pores regularly distributed on the wall. The morphology, the delicate microstructure and the crystal structure of this SMTA were characterized by super resolution digital microscopy, scanning electron microscopy, transmission electron microscopy and X-ray diffraction. The SMTA exhibits a high sensitivity to H2S gas at room temperature. It also exhibits a short response/recovery time, with an average value of 14/30 s at 5 ppm. In particular, heating is not required for the SMTA in the gas sensitivity measurement process. On the basis of these results, SMTA is proposed as a suitable new material for the design and fabrication of room-temperature H2S gas sensors.

Specifically and wash-free labeling of SNAP-tag fused proteins with a hybrid sensor to monitor local micro-viscosity.

PubMed

Wang, Chao; Song, Xinbo; Chen, Lingcheng; Xiao, Yi

2017-05-15

Viscosity, as one of the major factors of intracellular microenvironment, influences the function of proteins. To detect local micro-viscosity of a protein, it is a precondition to apply a viscosity sensor for specifically target to proteins. However, all the reported small-molecule probes are just suitable for sensing/imaging of macro-viscosity in biological fluids of entire cells or organelles. To this end, we developed a hybrid sensor BDP-V BG by connecting a viscosity-sensitive boron-dipyrromethene (BODIPY) molecular rotor (BDP-V) to O 6 -benzylguanine (BG) for specific detection of local micro-viscosity of SNAP-tag fused proteins. We measured and calculated the reaction efficiency between the sensor and SNAP-tag protein in vitro to confirm the high labeling specificity. We also found that the labeling reaction results in a 53-fold fluorescence enhancement for the rotor, which qualifies it as a wash-free sensor with ignorable background fluorescence. The high sensitivity of protein labeled sensor (BDP-V-SNAP) to the changes of local viscosity was evaluated by detecting the enhancement of fluorescence lifetimes. Further, with the sensor BDP-V BG, we achieved high specific labeling of cells expressing two SNAP-tag fused proteins (nuclear histone H2B and mitochondrial COX8A). Two-photon excited fluorescence lifetime imaging revealed that, the micro-viscosities nearby the SNAP-tag fused two proteins are distinct. The different changes of local micro-viscosity of SNAP-tag fused histone protein in apoptosis induced by three nucleus-targeted drugs were also characterized for the first time. Copyright © 2016 Elsevier B.V. All rights reserved.

Study on the Correlation between Humidity and Material Strains in Separable Micro Humidity Sensor Design

PubMed Central

Chang, Chih-Yuan

2017-01-01

Incidents of injuries caused by tiles falling from building exterior walls are frequently reported in Taiwan. Humidity is an influential factor in tile deterioration but it is more difficult to measure the humidity inside a building structure than the humidity in an indoor environment. Therefore, a separable microsensor was developed in this study to measure the humidity of the cement mortar layer with a thickness of 1.5–2 cm inside the external wall of a building. 3D printing technology is used to produce an encapsulation box that can protect the sensor from damage caused by the concrete and cement mortar. The sensor is proven in this study to be capable of measuring temperature and humidity simultaneously and the measurement results are then used to analyze the influence of humidity on external wall tile deterioration. PMID:28481300

Selected examples of intelligent (micro) sensor systems: state-of-the-art and tendencies

NASA Astrophysics Data System (ADS)

Hauptmann, Peter R.

2006-03-01

The capability of intelligent sensors to have more intelligence built into them continues to drive their application in areas including automotive, aerospace and defense, industrial, intelligent house and wear, medical and homeland security. In principle it is difficult to overestimate the importance of intelligent (micro) sensors or sensor systems within advanced societies but one characteristic feature is the global market for sensors, which is now about 20 billion annually. Therefore sensors or sensor systems play a dominant role in many fields from the macro sensor in manufacturing industry down to the miniaturized sensor for medical applications. The diversity of sensors precludes a complete description of the state-of-the-art; selected examples will illustrate the current situation. MEMS (microelectromechanical systems) devices are of special interest in the context of micro sensor systems. In past the main requirements of a sensor were in terms of metrological performance. The electrical (or optical) signal produced by the sensor needed to match the measure relatively accurately. Such basic functionality is no longer sufficient. Data processing near the sensor, the extraction of more information than just the direct sensor information by signal analysis, system aspects and multi-sensor information are the new demands. A shifting can be observed away from aiming to design perfect single-function transducers and towards the utilization of system-based sensors as system components. In the ideal case such systems contain sensors, actuators and electronics. They can be realized in monolithic, hybrid or discrete form—which kind is used depends on the application. In this article the state-of-the-art of intelligent sensors or sensor systems is reviewed using selected examples. Future trends are deduced.

The characteristic of gap FBG and its application

NASA Astrophysics Data System (ADS)

Yang, Yuanhong; Hu, Jun; Liu, Xuejing; Jin, Wei

2015-07-01

A gap fiber Bragg grating (g-FBG) is fabricated by cutting a uniform FBG in the middle to introduce a small air gap between the two sections. Numerical and experimental investigations show that the g-FBG has the characteristics of both a phase shifted FBG and a Fizeau interferometer. The influence of the air-gap shift longitudinally or transversely with respect to the fiber central axis and temperature to g-FBG's spectrums are investigated with numerical simulation and experiments, and the mathematic models are made. Based on g-FBG's different sensitivity to gap width and temperature, a micro-gap and temperature simultaneous measurement sensor was demonstrated. And a g-FBG based tunable fiber ring laser with a narrow line-width is demonstrated.

The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control

PubMed Central

Jenke, Christoph; Pallejà Rubio, Jaume; Kibler, Sebastian; Häfner, Johannes; Richter, Martin; Kutter, Christoph

2017-01-01

With the combination of micropumps and flow sensors, highly accurate and secure closed-loop controlled micro dosing systems for liquids are possible. Implementing a single stroke based control mode with piezoelectrically driven micro diaphragm pumps can provide a solution for dosing of volumes down to nanoliters or variable average flow rates in the range of nL/min to μL/min. However, sensor technologies feature a yet undetermined accuracy for measuring highly pulsatile micropump flow. Two miniaturizable in-line sensor types providing electrical readout—differential pressure based flow sensors and thermal calorimetric flow sensors—are evaluated for their suitability of combining them with mircopumps. Single stroke based calibration of the sensors was carried out with a new method, comparing displacement volumes and sensor flow volumes. Limitations of accuracy and performance for single stroke based flow control are described. Results showed that besides particle robustness of sensors, controlling resistive and capacitive damping are key aspects for setting up reproducible and reliable liquid dosing systems. Depending on the required average flow or defined volume, dosing systems with an accuracy of better than 5% for the differential pressure based sensor and better than 6.5% for the thermal calorimeter were achieved. PMID:28368344

Electrophysiological assessment of water stress in fruit-bearing woody plants.

PubMed

Ríos-Rojas, Liliana; Tapia, Franco; Gurovich, Luis A

2014-06-15

Development and evaluation of a real-time plant water stress sensor, based on the electrophysiological behavior of fruit-bearing woody plants is presented. Continuous electric potentials are measured in tree trunks for different irrigation schedules, inducing variable water stress conditions; results are discussed in relation to soil water content and micro-atmospheric evaporative demand, determined continuously by conventional sensors, correlating this information with tree electric potential measurements. Systematic and differentiable patterns of electric potentials for water-stressed and no-stressed trees in 2 fruit species are presented. Early detection and recovery dynamics of water stress conditions can also be monitored with these electrophysiology sensors, which enable continuous and non-destructive measurements for efficient irrigation scheduling throughout the year. The experiment is developed under controlled conditions, in Faraday cages located at a greenhouse area, both in Persea americana and Prunus domestica plants. Soil moisture evolution is controlled using capacitance sensors and solar radiation, temperature, relative humidity, wind intensity and direction are continuously registered with accurate weather sensors, in a micro-agrometeorological automatic station located at the experimental site. The electrophysiological sensor has two stainless steel electrodes (measuring/reference), inserted on the stem; a high precision Keithley 2701 digital multimeter is used to measure plant electrical signals; an algorithm written in MatLab(®), allows correlating the signal to environmental variables. An electric cyclic behavior is observed (circadian cycle) in the experimental plants. For non-irrigated plants, the electrical signal shows a time positive slope and then, a negative slope after restarting irrigation throughout a rather extended recovery process, before reaching a stable electrical signal with zero slope. Well-watered plants presented a continuous signal with daily maximum and a minimum EP of similar magnitude in time, with zero slope. This plant electrical behavior is proposed for the development of a sensor measuring real-time plant water status. Copyright © 2014 Elsevier GmbH. All rights reserved.

Global Environmental Micro Sensors Test Operations in the Natural Environment

NASA Technical Reports Server (NTRS)

Adams, Mark L.; Buza, Matthew; Manobianco, John; Merceret, Francis J.

2007-01-01

ENSCO, Inc. is developing an innovative atmospheric observing system known as Global Environmental Micro Sensors (GEMS). The GEMS concept features an integrated system of miniaturized in situ, airborne probes measuring temperature, relative humidity, pressure, and vector wind velocity. In order for the probes to remain airborne for long periods of time, their design is based on a helium-filled super-pressure balloon. The GEMS probes are neutrally buoyant and carried passively by the wind at predetermined levels. Each probe contains onboard satellite communication, power generation, processing, and geolocation capabilities. ENSCO has partnered with the National Aeronautics and Space Administration's Kennedy Space Center (KSC) for a project called GEMS Test Operations in the Natural Environment (GEMSTONE) that will culminate with limited prototype flights of the system in spring 2007. By leveraging current advances in micro and nanotechnology, the probe mass, size, cost, and complexity can be reduced substantially so that large numbers of probes could be deployed routinely to support ground, launch, and landing operations at KSC and other locations. A full-scale system will improve the data density for the local initialization of high-resolution numerical weather prediction systems by at least an order of magnitude and provide a significantly expanded in situ data base to evaluate launch commit criteria and flight rules. When applied to launch or landing sites, this capability will reduce both weather hazards and weather-related scrubs, thus enhancing both safety and cost-avoidance for vehicles processed by the Shuttle, Launch Services Program, and Constellation Directorates. The GEMSTONE project will conclude with a field experiment in which 10 to 15 probes are released over KSC in east central Florida. The probes will be neutrally buoyant at different altitudes from 500 to 3000 meters and will report their position, speed, heading, temperature, humidity, and pressure via satellite. The GEMS data will be validated against reference observations provided by current weather instrumentation located at KSC. This paper will report on the results of the GEMSTONE project and discuss the challenges encountered in developing an airborne sensor system.

Field Programmable Gate Array (FPGA) Respiratory Monitoring System Using a Flow Microsensor and an Accelerometer

NASA Astrophysics Data System (ADS)

Mellal, Idir; Laghrouche, Mourad; Bui, Hung Tien

2017-04-01

This paper describes a non-invasive system for respiratory monitoring using a Micro Electro Mechanical Systems (MEMS) flow sensor and an IMU (Inertial Measurement Unit) accelerometer. The designed system is intended to be wearable and used in a hospital or at home to assist people with respiratory disorders. To ensure the accuracy of our system, we proposed a calibration method based on ANN (Artificial Neural Network) to compensate the temperature drift of the silicon flow sensor. The sigmoid activation functions used in the ANN model were computed with the CORDIC (COordinate Rotation DIgital Computer) algorithm. This algorithm was also used to estimate the tilt angle in body position. The design was implemented on reconfigurable platform FPGA.

FPGA-Based Multiprocessor System for Injection Molding Control

PubMed Central

Muñoz-Barron, Benigno; Morales-Velazquez, Luis; Romero-Troncoso, Rene J.; Rodriguez-Donate, Carlos; Trejo-Hernandez, Miguel; Benitez-Rangel, Juan P.; Osornio-Rios, Roque A.

2012-01-01

The plastic industry is a very important manufacturing sector and injection molding is a widely used forming method in that industry. The contribution of this work is the development of a strategy to retrofit control of an injection molding machine based on an embedded system microprocessors sensor network on a field programmable gate array (FPGA) device. Six types of embedded processors are included in the system: a smart-sensor processor, a micro fuzzy logic controller, a programmable logic controller, a system manager, an IO processor and a communication processor. Temperature, pressure and position are controlled by the proposed system and experimentation results show its feasibility and robustness. As validation of the present work, a particular sample was successfully injected. PMID:23202036

Study on digital closed-loop system of silicon resonant micro-sensor

NASA Astrophysics Data System (ADS)

Xu, Yefeng; He, Mengke

2008-10-01

Designing a micro, high reliability weak signal extracting system is a critical problem need to be solved in the application of silicon resonant micro-sensor. The closed-loop testing system based on FPGA uses software to replace hardware circuit which dramatically decrease the system's mass and power consumption and make the system more compact, both correlation theory and frequency scanning scheme are used in extracting weak signal, the adaptive frequency scanning arithmetic ensures the system real-time. The error model was analyzed to show the solution to enhance the system's measurement precision. The experiment results show that the closed-loop testing system based on FPGA has the personality of low power consumption, high precision, high-speed, real-time etc, and also the system is suitable for different kinds of Silicon Resonant Micro-sensor.

Microsensors to monitor missile storage and maintenance needs

DOE Office of Scientific and Technical Information (OSTI.GOV)

Mee, D.K.; Thundat, T.G.; Oden, P.I.

1997-10-30

Accurate assessments of reliability and condition based maintenance can only be implemented where a good understanding of ammunition stockpile condition exists. Use of miniaturized intelligent sensors provides an inexpensive means of nondestructively gaining insight into stockpile condition while keeping costs low. In the past, evaluation of ammunition lifetimes has utilized humidity, temperature, pressure, shock, and corrosion. New technologies provide the possibility of obtaining these environmental parameters, as well as a number of other indicators of propellant degradation, including NOx by utilizing a microsensor with capability for remote wireless monitoring. Micro-electro-mechanical systems (MEMS) like microcantilevers promise to revolutionize the field ofmore » sensor design. In the automobile industry, micromachined acceleration sensors are now used for triggering airbags and pressure sensors adjust the air-fuel intake ratio in the engine. By applying coatings to the sensor`s surface the behavior of the microdevice can be measurably altered to respond to chemical species as demonstrated by ORNL using microcantilevers to detect mercury vapor and humidity. Ultimately, single-chip detectors with electronics and telemetry could be developed with conceivably hundreds of individual microsensors on each chip to simultaneously monitor identify, and quantify many important chemical species for ammunition as well as measure environmental parameters.« less

PREFACE: MicroTherm' 2013 - Microtechnology and Thermal Problems in Electronics

NASA Astrophysics Data System (ADS)

Lisik, Zbigniew; Raj, Ewa

2014-04-01

MicroTherm is an International Conference on Microtechnology and Thermal Problems in Electronics organised as a cyclic event since 1996. The success of the first seminar, which was devoted mainly to thermal management aspects, and the successive conferences have led us to the tenth edition. Since the first meeting, the scope of the conference has expanded, following the progress of electronics. Now, it covers subjects connected with extreme temperature, electronics, sensors and measurement techniques, modelling, simulation, wide band-gap materials, packaging and reliability, renewable energy sources and photonics with special emphasis on microelectronic technologies. MicroTherm' 2013 was held in Lodz, Poland, on 25-28 June 2013. The programme consistied of invited talks and nine regular sessions in the form of planar discussions and poster presentations, including a Students' Session. The Students' session gave an opportunity for students and young researchers to present their first achievements in the field of science. The next MicroTherm Conference is going to be held on 22-25 June 2015, in Lodz — a beautiful, post-industrial city located in the centre of Poland. Please, feel invited to MicroTherm' 2015 (www.microtherm.dsod.pl). Ewa Raj and Zbigniew Lisik Editors

Fabrication and Testing of a Thin-Film Heat Flux Sensor for a Stirling Convertor

NASA Technical Reports Server (NTRS)

Wilson, Scott D.; Fralick, Gustave; Wrbanek, John; Sayir, Ali

2009-01-01

The NASA Glenn Research Center (GRC) has been testing high efficiency free-piston Stirling convertors for potential use in radioisotope power systems since 1999. Stirling convertors are being operated for many years to demonstrate a radioisotope power system capable of providing reliable power for potential multi-year missions. Techniques used to monitor the convertors for change in performance include measurements of temperature, pressure, energy addition, and energy rejection. Micro-porous bulk insulation is used in the Stirling convertor test set up to minimize the loss of thermal energy from the electric heat source to the environment. The insulation is characterized before extended operation, enabling correlation of the net thermal energy addition to the convertor. Aging microporous bulk insulation changes insulation efficiency, introducing errors in the correlation for net thermal energy addition. A thin-mm heat flux sensor was designed and fabricated to directly measure the net thermal energy addition to the Stirling convertor. The fabrication techniques include slip casting and using Physical Vapor Deposition (PVD). One micron thick noble metal thermocouples measure temperature on the surface of an Alumina ceramic disc and heat flux is calculated. Fabrication, integration, and test results of a thin film heat flux sensor are presented.

Highly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films.

PubMed

Wagner, Stefan; Yim, Chanyoung; McEvoy, Niall; Kataria, Satender; Yokaribas, Volkan; Kuc, Agnieszka; Pindl, Stephan; Fritzen, Claus-Peter; Heine, Thomas; Duesberg, Georg S; Lemme, Max C

2018-05-23

Two-dimensional (2D) layered materials are ideal for micro- and nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness. Platinum diselenide (PtSe 2 ), an exciting and unexplored 2D transition metal dichalcogenide material, is particularly interesting because its low temperature growth process is scalable and compatible with silicon technology. Here, we report the potential of thin PtSe 2 films as electromechanical piezoresistive sensors. All experiments have been conducted with semimetallic PtSe 2 films grown by thermally assisted conversion of platinum at a complementary metal-oxide-semiconductor (CMOS)-compatible temperature of 400 °C. We report high negative gauge factors of up to -85 obtained experimentally from PtSe 2 strain gauges in a bending cantilever beam setup. Integrated NEMS piezoresistive pressure sensors with freestanding PMMA/PtSe 2 membranes confirm the negative gauge factor and exhibit very high sensitivity, outperforming previously reported values by orders of magnitude. We employ density functional theory calculations to understand the origin of the measured negative gauge factor. Our results suggest PtSe 2 as a very promising candidate for future NEMS applications, including integration into CMOS production lines.

Comparing success levels of different neural network structures in extracting discriminative information from the response patterns of a temperature-modulated resistive gas sensor

NASA Astrophysics Data System (ADS)

Hosseini-Golgoo, S. M.; Bozorgi, H.; Saberkari, A.

2015-06-01

Performances of three neural networks, consisting of a multi-layer perceptron, a radial basis function, and a neuro-fuzzy network with local linear model tree training algorithm, in modeling and extracting discriminative features from the response patterns of a temperature-modulated resistive gas sensor are quantitatively compared. For response pattern recording, a voltage staircase containing five steps each with a 20 s plateau is applied to the micro-heater of the sensor, when 12 different target gases, each at 11 concentration levels, are present. In each test, the hidden layer neuron weights are taken as the discriminatory feature vector of the target gas. These vectors are then mapped to a 3D feature space using linear discriminant analysis. The discriminative information content of the feature vectors are determined by the calculation of the Fisher’s discriminant ratio, affording quantitative comparison among the success rates achieved by the different neural network structures. The results demonstrate a superior discrimination ratio for features extracted from local linear neuro-fuzzy and radial-basis-function networks with recognition rates of 96.27% and 90.74%, respectively.

A Novel Multi-Aperture Based Sun Sensor Based on a Fast Multi-Point MEANSHIFT (FMMS) Algorithm

PubMed Central

You, Zheng; Sun, Jian; Xing, Fei; Zhang, Gao-Fei

2011-01-01

With the current increased widespread interest in the development and applications of micro/nanosatellites, it was found that we needed to design a small high accuracy satellite attitude determination system, because the star trackers widely used in large satellites are large and heavy, and therefore not suitable for installation on micro/nanosatellites. A Sun sensor + magnetometer is proven to be a better alternative, but the conventional sun sensor has low accuracy, and cannot meet the requirements of the attitude determination systems of micro/nanosatellites, so the development of a small high accuracy sun sensor with high reliability is very significant. This paper presents a multi-aperture based sun sensor, which is composed of a micro-electro-mechanical system (MEMS) mask with 36 apertures and an active pixels sensor (APS) CMOS placed below the mask at a certain distance. A novel fast multi-point MEANSHIFT (FMMS) algorithm is proposed to improve the accuracy and reliability, the two key performance features, of an APS sun sensor. When the sunlight illuminates the sensor, a sun spot array image is formed on the APS detector. Then the sun angles can be derived by analyzing the aperture image location on the detector via the FMMS algorithm. With this system, the centroid accuracy of the sun image can reach 0.01 pixels, without increasing the weight and power consumption, even when some missing apertures and bad pixels appear on the detector due to aging of the devices and operation in a harsh space environment, while the pointing accuracy of the single-aperture sun sensor using the conventional correlation algorithm is only 0.05 pixels. PMID:22163770

Non-contact respiration monitoring for in-vivo murine micro computed tomography: characterization and imaging applications

NASA Astrophysics Data System (ADS)

Burk, Laurel M.; Lee, Yueh Z.; Wait, J. Matthew; Lu, Jianping; Zhou, Otto Z.

2012-09-01

A cone beam micro-CT has previously been utilized along with a pressure-tracking respiration sensor to acquire prospectively gated images of both wild-type mice and various adult murine disease models. While the pressure applied to the abdomen of the subject by this sensor is small and is generally without physiological effect, certain disease models of interest, as well as very young animals, are prone to atelectasis with added pressure, or they generate too weak a respiration signal with this method to achieve optimal prospective gating. In this work we present a new fibre-optic displacement sensor which monitors respiratory motion of a subject without requiring physical contact. The sensor outputs an analogue signal which can be used for prospective respiration gating in micro-CT imaging. The device was characterized and compared against a pneumatic air chamber pressure sensor for the imaging of adult wild-type mice. The resulting images were found to be of similar quality with respect to physiological motion blur; the quality of the respiration signal trace obtained using the non-contact sensor was comparable to that of the pressure sensor and was superior for gating purposes due to its better signal-to-noise ratio. The non-contact sensor was then used to acquire in-vivo micro-CT images of a murine model for congenital diaphragmatic hernia and of 11-day-old mouse pups. In both cases, quality CT images were successfully acquired using this new respiration sensor. Despite the presence of beam hardening artefacts arising from the presence of a fibre-optic cable in the imaging field, we believe this new technique for respiration monitoring and gating presents an opportunity for in-vivo imaging of disease models which were previously considered too delicate for established animal handling methods.

Gas sensor with attenuated drift characteristic

DOEpatents

Chen, Ing-Shin [Danbury, CT; Chen, Philip S. H. [Bethel, CT; Neuner, Jeffrey W [Bethel, CT; Welch, James [Fairfield, CT; Hendrix, Bryan [Danbury, CT; Dimeo, Jr., Frank [Danbury, CT

2008-05-13

A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention

Using Micro-Molding and Stamping to Fabricate Conductive Polydimethylsiloxane-Based Flexible High-Sensitivity Strain Gauges.

PubMed

Han, Chi-Jui; Chiang, Hsuan-Ping; Cheng, Yun-Chien

2018-02-18

In this study, polydimethylsiloxane (PDMS) and conductive carbon nanoparticles were combined to fabricate a conductive elastomer PDMS (CPDMS). A high sensitive and flexible CPDMS strain sensor is fabricated by using stamping-process based micro patterning. Compared with conventional sensors, flexible strain sensors are more suitable for medical applications but are usually fabricated by photolithography, which suffers from a large number of steps and difficult mass production. Hence, we fabricated flexible strain sensors using a stamping-process with fewer processes than photolithography. The piezoresistive coefficient and sensitivity of the flexible strain sensor were improved by sensor pattern design and thickness change. Micro-patterning is used to fabricate various CPDMS microstructure patterns. The effect of gauge pattern was evaluated with ANSYS simulations. The piezoresistance of the strain gauges was measured and the gauge factor determined. Experimental results show that the piezoresistive coefficient of CPDMS is approximately linear. Gauge factor measurement results show that the gauge factor of a 140.0 μm thick strain gauge with five grids is the highest.

Application of Micro-Electro-Mechanical Sensors Contactless NDT of Concrete Structures.

PubMed

Ham, Suyun; Popovics, John S

2015-04-17

The utility of micro-electro-mechanical sensors (MEMS) for application in air-coupled (contactless or noncontact) sensing to concrete nondestructive testing (NDT) is studied in this paper. The fundamental operation and characteristics of MEMS are first described. Then application of MEMS sensors toward established concrete test methods, including vibration resonance, impact-echo, ultrasonic surface wave, and multi-channel analysis of surface waves (MASW), is demonstrated. In each test application, the performance of MEMS is compared with conventional contactless and contact sensing technology. Favorable performance of the MEMS sensors demonstrates the potential of the technology for applied contactless NDT efforts. To illustrate the utility of air-coupled MEMS sensors for concrete NDT, as compared with conventional sensor technology.

Development of Micro Air Reconnaissance Vehicle as a Test Bed for Advanced Sensors and Electronics

NASA Technical Reports Server (NTRS)

Shams, Qamar A.; Vranas, Thomas L.; Fox, Robert L.; Kuhn, Theodore R.; Ingham, John; Logan, Michael J.; Barnes, Kevin N.; Guenther, Benjamin F.

2002-01-01

This paper describes the development of a Micro/Mini Air Reconnaissance Vehicle for advanced sensors and electronics at NASA Langley Research Center over the last year. This vehicle is expected to have a total weight of less than four pounds, a design velocity of 40 mph, an endurance of 15-20 minutes, and a maximum range of 5km. The vehicle has wings that are simple to detach yet retain the correct alignment. The upper fuselage surface has a quick release hatch used to access the interior and also to mount the varying propulsion systems. The sensor suite developed for this vehicle consists of a Pitot-static measurement system for determining air speed, an absolute pressure measurement for determining altitude, magnetic direction measurement, and three orthogonal gyros to determine body angular rates. Swarming GPS-guidance and in-flight maneuvering is discussed, as well as design and installation of some other advance sensors like MEMS microphones, infrared cameras, GPS, humidity sensors, and an ultrasonic sonar sensor. Also low cost, small size, high performance control and navigation system for the Micro Air Vehicle is discussed. At the end, laboratory characterization of different sensors, motors, propellers, and batteries will be discussed.

Fabrication of a Miniature Multi-Parameter Sensor Chip for Water Quality Assessment

PubMed Central

Zhou, Bo; Bian, Chao; Tong, Jianhua; Xia, Shanhong

2017-01-01

Water contamination is a main inducement of human diseases. It is an important step to monitor the water quality in the water distribution system. Due to the features of large size, high cost, and complicated structure of traditional water determination sensors and devices, it is difficult to realize real-time water monitoring on a large scale. In this paper, we present a multi-parameter sensor chip, which is miniature, low-cost, and robust, to detect the pH, conductivity, and temperature of water simultaneously. The sensor chip was fabricated using micro-electro-mechanical system (MEMS) techniques. Iridium oxide film was electrodeposited as the pH-sensing material. The atomic ratio of Ir(III) to Ir(IV) is about 1.38 according to the X-ray photoelectron spectroscopy (XPS) analysis. The pH sensing electrode showed super-Nernstian response (−67.60 mV/pH) and good linearity (R2 = 0.9997), in the range of pH 2.22 to pH 11.81. KCl-agar and epoxy were used as the electrolyte layer and liquid junction for the solid-state reference electrode, respectively, and its potential stability in deionized water was 56 h. The conductivity cell exhibited a linear determination range from 21.43 μS/cm to 1.99 mS/cm, and the electrode constant was 1.566 cm−1. Sensitivity of the temperature sensor was 5.46 Ω/°C. The results indicate that the developed sensor chip has potential application in water quality measurements. PMID:28098824

Characterizations and Electrical Modelling of Sensory Samples Formed from Synthesized Vanadium (V) Oxide and Copper Oxide Graphene Quantum Tunneling Composites (GQTC) Applied in Electrotribology

PubMed Central

Habdank-Wojewódzki, Tadeusz; Habdank, Josef; Cwik, Przemyslaw; Zimowski, Slawomir

2016-01-01

CuO and V2O5 graphene quantum tunneling composites (GQTC) presented in this article were produced and their sensory properties were analyzed. The composites were synthesised using two stage high-power milling process, which resulted in materials that have good temeprature and pressure sensory properties. Described production process defines internal structure of materials such that when used as sensor in the desired range, it exhibits a strong percolation effect. The experiment, with controlled changing physical conditions during electrotribological measurement, enabled analyzing of the composites’ conductivity as a function of the sensory properties: applied temperature, pressure, tangential force and wear. The sensory characteristic was successfully modelled by invertible generalized equations, and used to create sensor capable of estimating temperature or pressure in the real time. The developed materials have the potential to be applied in the areas where miniaturization is essential, due to the materials exhibiting good sensory properties in mini and micro scale. PMID:26742044

Characterizations and Electrical Modelling of Sensory Samples Formed from Synthesized Vanadium (V) Oxide and Copper Oxide Graphene Quantum Tunneling Composites (GQTC) Applied in Electrotribology.

PubMed

Habdank-Wojewódzki, Tadeusz; Habdank, Josef; Cwik, Przemyslaw; Zimowski, Slawomir

2016-01-05

CuO and V₂O₅ graphene quantum tunneling composites (GQTC) presented in this article were produced and their sensory properties were analyzed. The composites were synthesised using two stage high-power milling process, which resulted in materials that have good temeprature and pressure sensory properties. Described production process defines internal structure of materials such that when used as sensor in the desired range, it exhibits a strong percolation effect. The experiment, with controlled changing physical conditions during electrotribological measurement, enabled analyzing of the composites' conductivity as a function of the sensory properties: applied temperature, pressure, tangential force and wear. The sensory characteristic was successfully modelled by invertible generalized equations, and used to create sensor capable of estimating temperature or pressure in the real time. The developed materials have the potential to be applied in the areas where miniaturization is essential, due to the materials exhibiting good sensory properties in mini and micro scale.

A Micro Aerosol Sensor for the Measurement of Airborne Ultrafine Particles.

PubMed

Zhang, Chao; Zhu, Rong; Yang, Wenming

2016-03-18

Particle number concentration and particle size are the two key parameters used to characterize exposure to airborne nanoparticles or ultrafine particles that have attracted the most attention. This paper proposes a simple micro aerosol sensor for detecting the number concentration and particle size of ultrafine particles with diameters from 50 to 253 nm based on electrical diffusion charging. The sensor is composed of a micro channel and a couple of planar electrodes printed on two circuit boards assembled in parallel, which thus integrate charging, precipitating and measurement elements into one chip, the overall size of which is 98 × 38 × 25 mm³. The experiment results demonstrate that the sensor is useful for measuring monodisperse aerosol particles with number concentrations from 300 to 2.5 × 10⁴ /cm³ and particle sizes from 50 to 253 nm. The aerosol sensor has a simple structure and small size, which is favorable for use in handheld devices.

A Micro Aerosol Sensor for the Measurement of Airborne Ultrafine Particles

PubMed Central

Zhang, Chao; Zhu, Rong; Yang, Wenming

2016-01-01

Particle number concentration and particle size are the two key parameters used to characterize exposure to airborne nanoparticles or ultrafine particles that have attracted the most attention. This paper proposes a simple micro aerosol sensor for detecting the number concentration and particle size of ultrafine particles with diameters from 50 to 253 nm based on electrical diffusion charging. The sensor is composed of a micro channel and a couple of planar electrodes printed on two circuit boards assembled in parallel, which thus integrate charging, precipitating and measurement elements into one chip, the overall size of which is 98 × 38 × 25 mm3. The experiment results demonstrate that the sensor is useful for measuring monodisperse aerosol particles with number concentrations from 300 to 2.5 × 104 /cm3 and particle sizes from 50 to 253 nm. The aerosol sensor has a simple structure and small size, which is favorable for use in handheld devices. PMID:26999156

Micro-Ares, An electric field sensor for ExoMars 2016

NASA Astrophysics Data System (ADS)

Déprez, G.; Montmessin, F.; Witasse, O.; Lapauw, L.; Vivat, F.; Abbaki, S.; Granier, P.; Moirin, D.; Trautner, R.; Hassen-Khodja, R.; d'Almeida, E.; Chardenal, L.; Berthelier, J.-J.; Espositi, F.; Debei, S.; Rafkin, S.; Barth, E.

2015-10-01

For the past few years, LATMOS has been involved in the development of Micro-ARES, an electric field sensor part of the science payload (DREAMS) of the ExoMars 2016 Schiaparelli entry, descent and landing demonstratormodule (EDM). It is dedicated to the very first measurement and characterization of the Martian atmospheric electricity.

Vacuum-compatible, ultra-low material budget Micro-Vertex Detector of the compressed baryonic matter experiment at FAIR

NASA Astrophysics Data System (ADS)

Koziel, Michal; Amar-Youcef, Samir; Bialas, Norbert; Deveaux, Michael; Fröhlich, Ingo; Klaus, Philipp; Michel, Jan; Milanović, Borislav; Müntz, Christian; Stroth, Joachim; Tischler, Tobias; Weirich, Roland; Wiebusch, Michael

2017-02-01

The Compressed Baryonic Matter (CBM) Experiment is one of the core experiments of the future FAIR facility near Darmstadt (Germany). The fixed-target experiment will explore the phase diagram of strongly interacting matter in the regime of high net baryon densities with numerous probes, among them open charm mesons. The Micro Vertex Detector (MVD) will provide the secondary vertex resolution of ∼ 50 μm along the beam axis, contribute to the background rejection in dielectron spectroscopy, and to the reconstruction of weak decays. The detector comprises four stations placed at 5, 10, 15, and 20 cm downstream the target and inside the target vacuum. The stations will be populated with highly granular CMOS Monolithic Active Pixel Sensors, which will feature a spatial resolution of < 5 μm, a non-ionizing radiation tolerance of >1013neq /cm2, an ionizing radiation tolerance of ∼ 3 Mrad, and a readout speed of a few 10 μs/frame. This work introduces the MVD-PRESTO project, which aims at integrating a precursor of the second station of the CBM-MVD meeting the following requirements: material budget of x /X0 < 0.5 %, vacuum compatibility, double-sided sensor integration on a Thermal Pyrolytic Graphite (TPG) carrier, and heat evacuation of about 350 mW/cm2/sensor with a temperature gradient of a few K/cm.

Ceramic Strain Gages for Use at Temperatures up to 1500 Celsius

NASA Technical Reports Server (NTRS)

Gregory, Otto; Fralick, Gustave (Technical Monitor)

2003-01-01

Indium-tin-oxide (ITO) thin film strain gages were successfully demonstrated at temperatures beyond 1500 C. High temperature static strain tests revealed that the piezoresistive response and electrical stability of the ceramic sensors depended on the thickness of the ITO films comprising the active strain elements. When 2.5 microns-thick ITO films were employed as the active strain elements, the piezoresistive response became unstable at temperatures above 1225 C. In contrast to this, ceramic sensors prepared with 5 microns-thick ITO were stable beyond 1430 C and sensors prepared with 8 microns-thick ITO survived more than 20 hr of operation at 1481 C. Very thick (10 microns) ITo strain gages were extremely stable and responsive at 1528 C. ESCA depth profiles confirmed that an interfacial reaction between the ITO strain gage and alumina substrate was responsible for the high temperature electrical stability observed. Similar improvements in high temperature stability were achieved by doping the active ITO strain elements with aluminum. Several Sic-Sic CMC constant strain beams were instrumented with ITO strain gages and delivered to NASA for testing. Due to the extreme surface roughness of the CMC substrates, new lithography techniques and surface preparation methods were developed. These techniques relied heavily on a combination of Sic and A12O3 cement layers to provide the necessary surface finish for efficient pattern transfer. Micro-contact printing using soft lithography and PDMS stamps was also used to successfully transfer the thin film strain gage patterns to the resist coated CMC substrates. This latter approach has considerable potential for transferring the thin film strain gage patterns to the extremely rough surfaces associated with the CMC's.

Efficient low-power wireless communication setup for an autonomous soil moisture sensor

NASA Astrophysics Data System (ADS)

Surducan, Vasile; Surducan, Emanoil

2017-12-01

During July 2016 - September 2017, a micro-irrigation system was set up and tested in field and greenhouse-like conditions, using eight inexpensive soil moisture sensors designed and manufactured in our institute. Each sensor was powered by accumulators charged by an (8 × 14) cm2 solar panel. The energy budget was carefully managed to allow long operating time for both the moisture sensor and the irrigation automation. We present here the hardware-software setup implemented in our proprietary moisture sensor for wireless communication, using Bluetooth Low Energy modules (BLE). The autonomy of the system may reach 4-5 cloudy days without the need of recharging the accumulators from the sun. Over the entire operating period, the moisture sensors send data wirelessly every sampling time (15 to 30 minutes) following water drips on the soil for the next 30 seconds, pushed by a low power micro pump. The micro-irrigation process is repeated every sampling time, until the soil moisture threshold is reached. In between the operating states, the sensor and watering automation go to sleep. The software algorithm ensures low energy (max. 2.8 mWh) consumption for the moisture sensor and 20 mWh for the irrigation automation, substantially increasing the accumulators discharge cycle.

Electrochemical micro sensor

DOEpatents

Setter, Joseph R.; Maclay, G. Jordan

1989-09-12

A micro-amperometric electrochemical sensor for detecting the presence of a pre-determined species in a fluid material is disclosed. The sensor includes a smooth substrate having a thin coating of solid electrolytic material deposited thereon. The working and counter electrodes are deposited on the surface of the solid electrolytic material and adhere thereto. Electrical leads connect the working and counter electrodes to a potential source and an apparatus for measuring the change in an electrical signal caused by the electrochemical oxidation or reduction of the species. Alternatively, the sensor may be fabricated in a sandwich structure and also may be cylindrical, spherical or other shapes.

High Sensitivity MEMS Strain Sensor: Design and Simulation

PubMed Central

Mohammed, Ahmed A. S.; Moussa, Walied A.; Lou, Edmond

2008-01-01

In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplifications include geometric, material and electronic levels. The sensor and the electronic circuits can be integrated on a single chip, and packaged as a small functional unit. The sensor converts input strain to resistance change, which can be transformed to bridge imbalance voltage. An analog output that demonstrates high sensitivity (0.03mV/με), high absolute resolution (1με) and low power consumption (100μA) with a maximum range of ±4000με has been reported. These performance characteristics have been achieved with high signal stability over a wide temperature range (±50°C), which introduces the proposed MEMS strain sensor as a strong candidate for wireless strain sensing applications under harsh environmental conditions. Moreover, this sensor has been designed, verified and can be easily modified to measure other values such as force, torque…etc. In this work, the sensor design is achieved using Finite Element Method (FEM) with the application of the piezoresistivity theory. This design process and the microfabrication process flow to prototype the design have been presented. PMID:27879841

Antenna-coupled transition-edge hot-electron microbolometers

NASA Astrophysics Data System (ADS)

Ali, Shafinaz; Timbie, Peter T.; Malu, Siddharth; McCammon, Dan; Nelms, Kari L.; Pathak, Rashmi; van der Weide, Daniel W.; Allen, Christine A.; Abrahams, J.; Chervenak, James A.; Hsieh, Wen-Ting; Miller, Timothy M.; Moseley, S. H., Jr.; Stevenson, Thomas R.; Wollack, Edward J.

2004-10-01

We are developing a new type of detector for observational cosmology and astrophysical research. Incoming radiation from the sky is coupled to a superconducting microstrip transmission line that terminates in a thin film absorber. At sub-Kelvin temperature, the thermal isolation between the electrons and the lattice makes it possible for the electrons in the small absorber (100's of cubic micro-meter) and superconducting bilayer (Transition Edge Sensor) to heat up by the radiation absorbed by the electrons of the normal absorbing layer. We call this detector a Transition-edge Hot-electron Micro-bolometer (THM). THMs can be fabricated by photo lithography, so it is relatively easy to make matched detectors for a large focal plane array telescope. We report on the thermal properties of Mo/Au THMs with Bi/Au absorbers.

Aircraft Aerodynamic Parameter Detection Using Micro Hot-Film Flow Sensor Array and BP Neural Network Identification

PubMed Central

Que, Ruiyi; Zhu, Rong

2012-01-01

Air speed, angle of sideslip and angle of attack are fundamental aerodynamic parameters for controlling most aircraft. For small aircraft for which conventional detecting devices are too bulky and heavy to be utilized, a novel and practical methodology by which the aerodynamic parameters are inferred using a micro hot-film flow sensor array mounted on the surface of the wing is proposed. A back-propagation neural network is used to model the coupling relationship between readings of the sensor array and aerodynamic parameters. Two different sensor arrangements are tested in wind tunnel experiments and dependence of the system performance on the sensor arrangement is analyzed. PMID:23112638

Aircraft aerodynamic parameter detection using micro hot-film flow sensor array and BP neural network identification.

PubMed

Que, Ruiyi; Zhu, Rong

2012-01-01

Air speed, angle of sideslip and angle of attack are fundamental aerodynamic parameters for controlling most aircraft. For small aircraft for which conventional detecting devices are too bulky and heavy to be utilized, a novel and practical methodology by which the aerodynamic parameters are inferred using a micro hot-film flow sensor array mounted on the surface of the wing is proposed. A back-propagation neural network is used to model the coupling relationship between readings of the sensor array and aerodynamic parameters. Two different sensor arrangements are tested in wind tunnel experiments and dependence of the system performance on the sensor arrangement is analyzed.

Developments and Applications of Electrogenerated Chemiluminescence Sensors Based on Micro- and Nanomaterials

PubMed Central

Hazelton, Sandra G.; Zheng, Xingwang; Zhao, Julia Xiaojun; Pierce, David T.

2008-01-01

A variety of recent developments and applications of electrogenerated chemiluminescence (ECL) for sensors are described. While tris(2,2′-bipyridyl)-ruthenium(II) and luminol have dominated and continue to pervade the field of ECL-based sensors, recent work has focused on use of these lumophores with micro- and nanomaterials. It has also extended to inherently luminescent nanomaterials, such as quantum dots. Sensor configurations including microelectrode arrays and microfluidics are reviewed and, with the recent trend toward increased use of nanomaterials, special attention has been given to sensors which include thin films, nanoparticles and nanotubes. Applications of ECL labels and examples of label-free sensing that incorporate nanomaterials are also discussed. PMID:27873850

Comparison of the temperature accuracy between smart phone based and high-end thermal cameras using a temperature gradient phantom

NASA Astrophysics Data System (ADS)

Klaessens, John H.; van der Veen, Albert; Verdaasdonk, Rudolf M.

2017-03-01

Recently, low cost smart phone based thermal cameras are being considered to be used in a clinical setting for monitoring physiological temperature responses such as: body temperature change, local inflammations, perfusion changes or (burn) wound healing. These thermal cameras contain uncooled micro-bolometers with an internal calibration check and have a temperature resolution of 0.1 degree. For clinical applications a fast quality measurement before use is required (absolute temperature check) and quality control (stability, repeatability, absolute temperature, absolute temperature differences) should be performed regularly. Therefore, a calibrated temperature phantom has been developed based on thermistor heating on both ends of a black coated metal strip to create a controllable temperature gradient from room temperature 26 °C up to 100 °C. The absolute temperatures on the strip are determined with software controlled 5 PT-1000 sensors using lookup tables. In this study 3 FLIR-ONE cameras and one high end camera were checked with this temperature phantom. The results show a relative good agreement between both low-cost and high-end camera's and the phantom temperature gradient, with temperature differences of 1 degree up to 6 degrees between the camera's and the phantom. The measurements were repeated as to absolute temperature and temperature stability over the sensor area. Both low-cost and high-end thermal cameras measured relative temperature changes with high accuracy and absolute temperatures with constant deviations. Low-cost smart phone based thermal cameras can be a good alternative to high-end thermal cameras for routine clinical measurements, appropriate to the research question, providing regular calibration checks for quality control.

Optical Fiber-Tip Sensors Based on In-Situ µ-Printed Polymer Suspended-Microbeams.

PubMed

Yao, Mian; Ouyang, Xia; Wu, Jushuai; Zhang, A Ping; Tam, Hwa-Yaw; Wai, P K A

2018-06-05

Miniature optical fiber-tip sensors based on directly µ-printed polymer suspended-microbeams are presented. With an in-house optical 3D μ-printing technology, SU-8 suspended-microbeams are fabricated in situ to form Fabry⁻Pérot (FP) micro-interferometers on the end face of standard single-mode optical fiber. Optical reflection spectra of the fabricated FP micro-interferometers are measured and fast Fourier transform is applied to analyze the cavity of micro-interferometers. The applications of the optical fiber-tip sensors for refractive index (RI) sensing and pressure sensing, which showed 917.3 nm/RIU to RI change and 4.29 nm/MPa to pressure change, respectively, are demonstrated in the experiments. The sensors and their optical µ-printing method unveil a new strategy to integrate complicated microcomponents on optical fibers toward 'lab-on-fiber' devices and applications.

Numerical Study on the Particle Trajectory Tracking in a Micro-UV Bio-Fluorescence Sensor.

PubMed

Byeon, Sun-Seok; Cho, Moon-Young; Lee, Jong-Chul; Kim, Youn-Jea

2015-03-01

A micro-UV bio-fluorescence sensor was developed to detect primary biological aerosols including bacteria, bacterial spores, fungal spores, pollens, viruses, algae, etc. In order to effectively detect the bio-particles in a micro-UV bio-fluorescence sensor, numerical calculations were performed to adjust for appropriate flow conditions of the sensor by regulating the sample aerosols and sheath flow. In particular, a CFD-based model of hydrodynamic processes was developed by computing the trajectory of particles using commercially available ANSYS CFX-14 software and the Lagrangian tracking model. The established model was evaluated with regard to the variation of sheath flow rate and particle size. Results showed that the sheath flow was changed rapidly at the end of nozzle tip, but the sample particles moved near the center of aerosol jet for aerodynamic focusing with little deviation from the axis.

Mixed-mode VLSI optic flow sensors for in-flight control of a micro air vehicle

NASA Astrophysics Data System (ADS)

Barrows, Geoffrey L.; Neely, C.

2000-11-01

NRL is developing compact optic flow sensors for use in a variety of small-scale navigation and collision avoidance tasks. These sensors are being developed for use in micro air vehicles (MAVs), which are autonomous aircraft whose maximum dimension is on the order of 15 cm. To achieve desired weight specifications of 1 - 2 grams, mixed-signal VLSI circuitry is being used to develop compact focal plane sensors that directly compute optic flow. As an interim proof of principle, we have constructed a sensor comprising a focal plane sensor head with on-chip processing and a back-end PIC microcontroller. This interim sensors weighs approximately 25 grams and is able to measure optic flow with real-world and low-contrast textures. Variations of this sensor have been used to control the flight of a glider in real-time to avoid collisions with walls.

Photonic Low Cost Micro-Sensor for in-Line Wear Particle Detection in Flowing Lube Oils.

PubMed

Mabe, Jon; Zubia, Joseba; Gorritxategi, Eneko

2017-03-14

The presence of microscopic particles in suspension in industrial fluids is often an early warning of latent or imminent failures in the equipment or processes where they are being used. This manuscript describes work undertaken to integrate different photonic principles with a micro- mechanical fluidic structure and an embedded processor to develop a fully autonomous wear debris sensor for in-line monitoring of industrial fluids. Lens-less microscopy, stroboscopic illumination, a CMOS imager and embedded machine vision technologies have been merged to develop a sensor solution that is able to detect and quantify the number and size of micrometric particles suspended in a continuous flow of a fluid. A laboratory test-bench has been arranged for setting up the configuration of the optical components targeting a static oil sample and then a sensor prototype has been developed for migrating the measurement principles to real conditions in terms of operating pressure and flow rate of the oil. Imaging performance is quantified using micro calibrated samples, as well as by measuring real used lubricated oils. Sampling a large fluid volume with a decent 2D spatial resolution, this photonic micro sensor offers a powerful tool at very low cost and compacted size for in-line wear debris monitoring.

Photonic Low Cost Micro-Sensor for in-Line Wear Particle Detection in Flowing Lube Oils

PubMed Central

Mabe, Jon; Zubia, Joseba; Gorritxategi, Eneko

2017-01-01

The presence of microscopic particles in suspension in industrial fluids is often an early warning of latent or imminent failures in the equipment or processes where they are being used. This manuscript describes work undertaken to integrate different photonic principles with a micro- mechanical fluidic structure and an embedded processor to develop a fully autonomous wear debris sensor for in-line monitoring of industrial fluids. Lens-less microscopy, stroboscopic illumination, a CMOS imager and embedded machine vision technologies have been merged to develop a sensor solution that is able to detect and quantify the number and size of micrometric particles suspended in a continuous flow of a fluid. A laboratory test-bench has been arranged for setting up the configuration of the optical components targeting a static oil sample and then a sensor prototype has been developed for migrating the measurement principles to real conditions in terms of operating pressure and flow rate of the oil. Imaging performance is quantified using micro calibrated samples, as well as by measuring real used lubricated oils. Sampling a large fluid volume with a decent 2D spatial resolution, this photonic micro sensor offers a powerful tool at very low cost and compacted size for in-line wear debris monitoring. PMID:28335436

Development of High Power Density Micro-Thermoelectric Generators

NASA Astrophysics Data System (ADS)

Zhang, Wenhua

Thermoelectric generators (TEGs) are promising for the waste heat recovery in virtue of the ability to directly convert heat to electricity. Despite of their relatively low energy conversion efficiency, TEGs have many advantages including high reliability, long lifetime, and environmental friendliness. Especially, compared to conventional heat engines, TEGs are compact, scalable, and can be easily driven by small temperature differences. Potential applications of TEGs include thermal sensing, thermal management, and thermal energy harvesting to power wireless sensors and microelectronic devices such as wearable medical sensors and wristwatches. This dissertation presents my work on development of high power density non-flexible and flexible micro-TEGs for thermal energy harvesting in the ambient environment. Micro- TEGs are developed by a bottom-up approach combing electroplating and microfabrication processes. Pulsed electroplating is mainly adopted to deposit thermoelectric materials in the device fabrication. First, I collaborated with Dr. Zhou in our lab and systematically studied the effect of deposition parameters on composition, microstructure, and thermoelectric properties of the electroplated Bi2Te3 and Sb2 Te3 thin films. We demonstrated that thermoelectric properties of both Bi2Te3 and Sb2Te3 films can be enhanced by tuning the pulse off-to-on ratio. After the fundamental study on the deposition conditions, morphology, and thermoelectric properties of the electroplated materials, we fabricated a high power density cross-plane micro-TEG on the SiO2/Si substrate by integrating the pulsed electroplating with microfabrication processes. The TEG consists of a total of 127 pairs of n-type Bi2Te3 and ptype Sb2Te3 thermoelectric pillars embedded in a SU-8 matrix to enhance the overall mechanical strength of the device. Both bottom and top electrical connections are formed by electroplating, which is advantageous because of facile and low cost fabrication and low parasitic electrical resistances. The device demonstrates a maximum power of 2990 muW at a temperature difference of 52.5 K, corresponding to a power density as high as 9.2 mW cm-2. The power density of our device is more than two times the highest value reported for the electroplated micro-TEGs in the literature, which can be attributed to the low internal resistance and high packing density of thermoelectric pillars. Based on my work on non-flexible micro-TEGs, I further modified the device fabrication process and developed an ultra-light high power density flexible micro-TEG. The flexible TEG demonstrates excellent flexibility. No obvious electrical resistance change was observed after bending to a curvature as small as 5 mm for 600 times. The flexible micro-TEG we developed demonstrates a maximum power of 1.5 mW at a temperature difference of 50.7 K, corresponding to a power density of 4.5 mW cm-2. More importantly, the flexible TEG is ultra-light and an unprecedentedly high power per unit mass of 60 mW g-1 is achieved, which might be beneficial for wearable technology.

Embedded micro-sensor for monitoring pH in concrete structures

NASA Astrophysics Data System (ADS)

Srinivasan, Rengaswamy; Phillips, Terry E.; Bargeron, C. Brent; Carlson, Micah A.; Schemm, Elizabeth R.; Saffarian, Hassan M.

2000-04-01

Three major causes of corrosion of steel in concrete are chloride ions (Cl-), temperature (T) and acidity (pH). Under normal operating temperatures and with pH above 13, steel does not undergo pitting corrosion. In presence of Cl-, if the pH decreases below 12, the probability of pitting increases. Acid rain and atmospheric carbon dioxide cause the pH to drop in concrete, often leading to corrosion of the structure with the concomitant cost of repair or replacement. Currently, the pH level in concrete is estimated through destructive testing of the structures. Glass ISFET, and other pH sensors that need maintenance and calibration cannot be embedded in concrete. In this paper, we describe an inexpensive solid state pH sensor that can be embedded in concrete, to detect pH changes at the early stages. It employs a chemical reagent, trinitrobenzenesulfonic acid (TNBS) that exhibits changes in optical properties in the 12 - 14 pH range, and is held in a film of a sol-gel/TNBS composite on an optically transparent surface. A simple LED/filter/photodiode transducer monitors pH-induced changes in TNBS. Such a device needs no periodic calibration or maintenance. The optical window, the light-source and sensor can be easily housed and encapsulated in a chemically inert structure, and embedded in concrete.

Accurate Sample Time Reconstruction of Inertial FIFO Data.

PubMed

Stieber, Sebastian; Dorsch, Rainer; Haubelt, Christian

2017-12-13

In the context of modern cyber-physical systems, the accuracy of underlying sensor data plays an increasingly important role in sensor data fusion and feature extraction. The raw events of multiple sensors have to be aligned in time to enable high quality sensor fusion results. However, the growing number of simultaneously connected sensor devices make the energy saving data acquisition and processing more and more difficult. Hence, most of the modern sensors offer a first-in-first-out (FIFO) interface to store multiple data samples and to relax timing constraints, when handling multiple sensor devices. However, using the FIFO interface increases the negative influence of individual clock drifts-introduced by fabrication inaccuracies, temperature changes and wear-out effects-onto the sampling data reconstruction. Furthermore, additional timing offset errors due to communication and software latencies increases with a growing number of sensor devices. In this article, we present an approach for an accurate sample time reconstruction independent of the actual clock drift with the help of an internal sensor timer. Such timers are already available in modern sensors, manufactured in micro-electromechanical systems (MEMS) technology. The presented approach focuses on calculating accurate time stamps using the sensor FIFO interface in a forward-only processing manner as a robust and energy saving solution. The proposed algorithm is able to lower the overall standard deviation of reconstructed sampling periods below 40 μ s, while run-time savings of up to 42% are achieved, compared to single sample acquisition.

High capacity fiber optic sensor networks using hybrid multiplexing techniques and their applications

NASA Astrophysics Data System (ADS)

Sun, Qizhen; Li, Xiaolei; Zhang, Manliang; Liu, Qi; Liu, Hai; Liu, Deming

2013-12-01

Fiber optic sensor network is the development trend of fiber senor technologies and industries. In this paper, I will discuss recent research progress on high capacity fiber sensor networks with hybrid multiplexing techniques and their applications in the fields of security monitoring, environment monitoring, Smart eHome, etc. Firstly, I will present the architecture of hybrid multiplexing sensor passive optical network (HSPON), and the key technologies for integrated access and intelligent management of massive fiber sensor units. Two typical hybrid WDM/TDM fiber sensor networks for perimeter intrusion monitor and cultural relics security are introduced. Secondly, we propose the concept of "Microstructure－Optical X Domin Refecltor (M-OXDR)" for fiber sensor network expansion. By fabricating smart micro-structures with the ability of multidimensional encoded and low insertion loss along the fiber, the fiber sensor network of simple structure and huge capacity more than one thousand could be achieved. Assisted by the WDM/TDM and WDM/FDM decoding methods respectively, we built the verification systems for long-haul and real-time temperature sensing. Finally, I will show the high capacity and flexible fiber sensor network with IPv6 protocol based hybrid fiber/wireless access. By developing the fiber optic sensor with embedded IPv6 protocol conversion module and IPv6 router, huge amounts of fiber optic sensor nodes can be uniquely addressed. Meanwhile, various sensing information could be integrated and accessed to the Next Generation Internet.

NEET Enhanced Micro-Pocket Fission Detector for High Temperature Reactors - FY16 Status Report

DOE Office of Scientific and Technical Information (OSTI.GOV)

Unruh, Troy; Reichenberger, Michael; Stevenson, Sarah

2016-09-01

A collaboration between the Idaho National Laboratory (INL), the Kansas State University (KSU), and the French Atomic Energy Agency, Commissariat à l'Énergie Atomique et aux Energies Alternatives, (CEA), has been initiated by the Nuclear Energy Enabling Technologies (NEET) Advanced Sensors and Instrumentation (ASI) program for developing and testing High Temperature Micro-Pocket Fission Detectors (HT MPFD), which are compact fission chambers capable of simultaneously measuring thermal neutron flux, fast neutron flux and temperature within a single package for temperatures up to 800 °C. The MPFD technology utilizes a small, multi-purpose, robust, in-core fission chambers and thermocouple. As discussed within this report,more » the small size, variable sensitivity, and increased accuracy of the MPFD technology represent a revolutionary improvement over current methods used to support irradiations in US Material Test Reactors (MTRs). Previous research conducted through NEET ASI1-3 has shown that the MPFD technology could be made robust and was successfully tested in a reactor core. This new project will further the MPFD technology for higher temperature regimes and other reactor applications by developing a HT MPFD suitable for temperatures up to 800 °C. This report summarizes the research progress for year two of this three year project. Highlights from research accomplishments include: • Continuation of a joint collaboration between INL, KSU, and CEA. Note that CEA is participating at their own expense because of interest in this unique new sensor. • An updated parallel wire HT MPFD design was developed. • Program support for HT MPFD deployments was given to Accident Tolerant Fuels (ATF) and Advanced Gas-cooled Reactor (AGR) irradiation test programs. • Quality approved materials for HT MPFD construction were procured by irradiation test programs for upcoming deployments. • KSU improved and performed electrical contact and fissile material plating. • KSU delivered fissile HT MPFD parts to INL for final construction of HT MPFD prototype. • A prototype HT MPFD was constructed and analyzed at INL. • The HT MPFD has been modeled in MCNP to optimize the amount of fissile material deposition. • The HT MPFD has been modeled in MCNP to optimize the sensor location in the irradiation test. • The fissile material deposition is undergoing independent verifications. • Detector amplifier electronics have been revised and tested by KSU. • Several project meetings were held at INL and KSU to discuss the roles and responsibilities between INL, KSU, and CEA for development and deployment of the HT MPFDs. As documented in this report, FY16 funding has allowed the project to meet year two planned accomplishments to develop a HT MPFD. In addition, the accomplishments of this project have attracted independent funding from other Department of Energy Office of Nuclear Energy (DOE-NE) programs for MTR irradiations of the MPFD technology. These are significant opportunities for this NEET Enhanced Micro-Pocket Fission Detector for High Temperature Reactors project because the irradiation expense of these experiments could not be included in the original project scope.« less

Label-free detection of biomolecules with Ta2O5-based field effect devices

NASA Astrophysics Data System (ADS)

Branquinho, Rita Maria Mourao Salazar

Field-effect-based devices (FEDs) are becoming a basic structural element in a new generation of micro biosensors. Their numerous advantages such as small size, labelfree response and versatility, together with the possibility of on-chip integration of biosensor arrays with a future prospect of low-cost mass production, make their development highly desirable. The present thesis focuses on the study and optimization of tantalum pentoxide (Ta2O5) deposited by rf magnetron sputtering at room temperature, and their application as sensitive layer in biosensors based on field effect devices (BioFEDs). As such, the influence of several deposition parameters and post-processing annealing temperature and surface plasma treatment on the film¡¦s properties was investigated. Electrolyte-insulator-semiconductor (EIS) field-effect-based sensors comprising the optimized Ta2O5 sensitive layer were applied to the development of BioFEDs. Enzyme functionalized sensors (EnFEDs) were produced for penicillin detection. These sensors were also applied to the label free detection of DNA and the monitoring of its amplification via polymerase chain reaction (PCR), real time PCR (RT-PCR) and loop mediated isothermal amplification (LAMP). Ion sensitive field effect transistors (ISFETs) based on semiconductor oxides comprising the optimized Ta2O5 sensitive layer were also fabricated. EIS sensors comprising Ta2O5 films produced with optimized conditions demonstrated near Nernstian pH sensitivity, 58+/-0.3 mV/pH. These sensors were successfully applied to the label-free detection of penicillin and DNA. Penicillinase functionalized sensors showed a 29+/-7 mV/mM sensitivity towards penicillin detection up to 4 mM penicillin concentration. DNA detection was achieved with 30 mV/mugM sensitivity and DNA amplification monitoring with these sensors showed comparable results to those obtained with standard fluorescence based methods. Semiconductor oxides-based ISFETs with Ta2O5 sensitive layer were also produced. Finally, the high quality and sensitivity demonstrated by Ta2O5 thin films produced at low temperature by rf magnetron sputtering allows for their application as sensitive layer in field effect sensors.

Multi-terminal remote monitoring and warning system using Micro Air Vehicle for dangerous environment

NASA Astrophysics Data System (ADS)

Yu, Yanan; Wang, Xiaoxun; He, Chengcheng; Lai, Chenlong; Liu, Yuanchao

2015-11-01

For overcoming the problems such as remote operation and dangerous tasks, multi-terminal remote monitoring and warning system based on STC89C52 Micro Control Unit and wireless communication technique was proposed. The system with MCU as its core adopted multiple sets of sensor device to monitor environment parameters of different locations, such as temperature, humidity, smoke other harmful gas concentration. Data information collected was transmitted remotely by wireless transceiver module, and then multi-channel data parameter was processed and displayed through serial communication protocol between the module and PC. The results of system could be checked in the form of web pages within a local network which plays a wireless monitoring and warning role. In a remote operation, four-rotor micro air vehicle which fixed airborne data acquisition device was utilized as a middleware between collecting terminal and PC to increase monitoring scope. Whole test system has characteristics of simple construction, convenience, real time ability and high reliability, which could meet the requirements of actual use.

Fabrication and Testing of a Modular Micro-Pocket Fission Detector Instrumentation System for Test Nuclear Reactors

NASA Astrophysics Data System (ADS)

Reichenberger, Michael A.; Nichols, Daniel M.; Stevenson, Sarah R.; Swope, Tanner M.; Hilger, Caden W.; Roberts, Jeremy A.; Unruh, Troy C.; McGregor, Douglas S.

2018-01-01

Advancements in nuclear reactor core modeling and computational capability have encouraged further development of in-core neutron sensors. Measurement of the neutron-flux distribution within the reactor core provides a more complete understanding of the operating conditions in the reactor than typical ex-core sensors. Micro-Pocket Fission Detectors have been developed and tested previously but have been limited to single-node operation and have utilized highly specialized designs. The development of a widely deployable, multi-node Micro-Pocket Fission Detector assembly will enhance nuclear research capabilities. A modular, four-node Micro-Pocket Fission Detector array was designed, fabricated, and tested at Kansas State University. The array was constructed from materials that do not significantly perturb the neutron flux in the reactor core. All four sensor nodes were equally spaced axially in the array to span the fuel-region of the reactor core. The array was filled with neon gas, serving as an ionization medium in the small cavities of the Micro-Pocket Fission Detectors. The modular design of the instrument facilitates the testing and deployment of numerous sensor arrays. The unified design drastically improved device ruggedness and simplified construction from previous designs. Five 8-mm penetrations in the upper grid plate of the Kansas State University TRIGA Mk. II research nuclear reactor were utilized to deploy the array between fuel elements in the core. The Micro-Pocket Fission Detector array was coupled to an electronic support system which has been specially developed to support pulse-mode operation. The Micro-Pocket Fission Detector array composed of four sensors was used to monitor local neutron flux at a constant reactor power of 100 kWth at different axial locations simultaneously. The array was positioned at five different radial locations within the core to emulate the deployment of multiple arrays and develop a 2-dimensional measurement of neutron flux in the reactor core.

Carbon Nanotube Bolometer for Absolute FTIR Spectroscopy

NASA Astrophysics Data System (ADS)

Woods, Solomon; Neira, Jorge; Tomlin, Nathan; Lehman, John

We have developed and calibrated planar electrical-substitution bolometers which employ absorbers made from vertically-aligned carbon nanotube arrays. The nearly complete absorption of light by the carbon nanotubes from the visible range to the far-infrared can be exploited to enable a device with read-out in native units equivalent to optical power. Operated at cryogenic temperatures near 4 K, these infrared detectors are designed to have time constant near 10 ms and a noise floor of about 10 pW. Built upon a micro-machined silicon platform, each device has an integrated heater and thermometer, either a carbon nanotube thermistor or superconducting transition edge sensor, for temperature control. We are optimizing temperature-controlled measurement techniques to enable high resolution spectral calibrations using these devices with a Fourier-transform spectrometer.

Low-cost low-power uncooled a-Si-based micro infrared camera for unattended ground sensor applications

NASA Astrophysics Data System (ADS)

Schimert, Thomas R.; Ratcliff, David D.; Brady, John F., III; Ropson, Steven J.; Gooch, Roland W.; Ritchey, Bobbi; McCardel, P.; Rachels, K.; Wand, Marty; Weinstein, M.; Wynn, John

1999-07-01

Low power and low cost are primary requirements for an imaging infrared camera used in unattended ground sensor arrays. In this paper, an amorphous silicon (a-Si) microbolometer-based uncooled infrared camera technology offering a low cost, low power solution to infrared surveillance for UGS applications is presented. A 15 X 31 micro infrared camera (MIRC) has been demonstrated which exhibits an f/1 noise equivalent temperature difference sensitivity approximately 67 mK. This sensitivity has been achieved without the use of a thermoelectric cooler for array temperature stabilization thereby significantly reducing the power requirements. The chopperless camera is capable of operating from snapshot mode (1 Hz) to video frame rate (30 Hz). Power consumption of 0.4 W without display, and 0.75 W with display, respectively, has been demonstrated at 30 Hz operation. The 15 X 31 camera demonstrated exhibits a 35 mm camera form factor employing a low cost f/1 singlet optic and LED display, as well as low cost vacuum packaging. A larger 120 X 160 version of the MIRC is also in development and will be discussed. The 120 X 160 MIRC exhibits a substantially smaller form factor and incorporates all the low cost, low power features demonstrated in the 15 X 31 MIRC prototype. In this paper, a-Si microbolometer technology for the MIRC will be presented. Also, the key features and performance parameters of the MIRC are presented.

Hydrogen peroxide biosensor based on a myoglobin/hydrophilic room temperature ionic liquid film.

PubMed

Safavi, Afsaneh; Farjami, Fatemeh

2010-07-01

The composite film based on Nafion and hydrophilic room temperature ionic liquid (RTIL) 1-butyl-3-methyl-imidazolium chloride ([bmim]Cl) was used as an immobilization matrix to entrap myoglobin (Mb). The study of ionic liquid (IL)-Mb interaction by ultraviolet-visible (UV-vis) spectroscopy showed that Mb retains its native conformation in the presence of IL. The immobilized Mb displayed a pair of well-defined cyclic voltammetric peaks with a formal potential (E(o)(')) of -0.35 V in a 0.1 M phosphate buffer solution (PBS) of pH 7.0. The immobilized Mb exhibited excellent electrocatalytic response to the reduction of hydrogen peroxide, based on which a mediator-free amperometric biosensor for hydrogen peroxide was designed. The linear range for the determination of hydrogen peroxide was from 1.0 to 180 microM with a detection limit of 0.14 microM at a signal/noise ratio of 3. The apparent Michaelis constant (K(m)(app)) for the electrocatalytic reaction was 22.6 microM. The stability, repeatability, and selectivity of the sensor were evaluated. The proposed biosensor has a lower detection limit than many other IL-heme protein-based biosensors and is free from common interference in hydrogen peroxide biosensors. 2010 Elsevier Inc. All rights reserved.

High-Frequency Fiber-Optic Ultrasonic Sensor Using Air Micro-Bubble for Imaging of Seismic Physical Models.

PubMed

Gang, Tingting; Hu, Manli; Rong, Qiangzhou; Qiao, Xueguang; Liang, Lei; Liu, Nan; Tong, Rongxin; Liu, Xiaobo; Bian, Ce

2016-12-14

A micro-fiber-optic Fabry-Perot interferometer (FPI) is proposed and demonstrated experimentally for ultrasonic imaging of seismic physical models. The device consists of a micro-bubble followed by the end of a single-mode fiber (SMF). The micro-structure is formed by the discharging operation on a short segment of hollow-core fiber (HCF) that is spliced to the SMF. This micro FPI is sensitive to ultrasonic waves (UWs), especially to the high-frequency (up to 10 MHz) UW, thanks to its ultra-thin cavity wall and micro-diameter. A side-band filter technology is employed for the UW interrogation, and then the high signal-to-noise ratio (SNR) UW signal is achieved. Eventually the sensor is used for lateral imaging of the physical model by scanning UW detection and two-dimensional signal reconstruction.

Fast Uncooled Low Density FPA of VPD PbSe for Applications in Hyperspectral Imagery

DTIC Science & Technology

2009-10-01

Marañosa (ITM-CIDA). Area de Optronica y Acustica Unidad de Sensores y Micro-Nano Tecnologia Arturo Soria, 289 E-28033 Madrid, Spain ABSTRACT...ADDRESS(ES) Instituto Tecnologico de la Marañosa (ITM-CIDA). Area de Optronica y Acustica Unidad de Sensores y Micro-Nano Tecnologia Arturo Soria, 289

Flower elliptical constellation of millimeter-wave radiometers for precipitating cloud monitoring at geostationary scale

NASA Astrophysics Data System (ADS)

Marzano, F. S.; Cimini, D.; Montopoli, M.; Rossi, T.; Mortari, D.; di Michele, S.; Bauer, P.

2009-04-01

Millimeter-wave observation of the atmospheric parameters is becoming an appealing goal within satellite radiometry applications. The major technological advantage of millimeter-wave (MMW) radiometers is the reduced size of the overall system, for given performances, with respect to microwave sensor. On the other hand, millimeter-wave sounding can exploit window frequencies and various gaseous absorption bands at 50/60 GHz, 118 GHz and 183 GHz. These bands can be used to estimate tropospheric temperature profiles, integrated water vapor and cloud liquid content and, using a differentia spectral mode, light rainfall and snowfall. Millimeter-wave radiometers, for given observation conditions, can also exhibit relatively small field-of-views (FOVs), of the order of some kilometers for low-Earth-orbit (LEO) satellites. However, the temporal resolution of LEO millimeter-wave system observations remains a major drawback with respect to the geostationary-Earth-orbit (GEO) satellites. An overpass every about 12 hours for a single LEO platform (conditioned to a sufficiently large swath of the scanning MMW radiometer) is usually too much when compared with the typical temporal scale variation of atmospheric fields. This feature cannot be improved by resorting to GEO platforms due to their high orbit altitude and consequent degradation of the MMW-sensor FOVs. A way to tackle this impasse is to draw our attention at the regional scale and to focus non-circular orbits over the area of interest, exploiting the concept of micro-satellite flower constellations. The Flower Constellations (FCs) is a general class of elliptical orbits which can be optimized, through genetic algorithms, in order to maximize the revisiting time and the orbital height, ensuring also a repeating ground-track. The constellation concept nicely matches the choice of mini-satellites as a baseline choice, due to their small size, weight (less than 500 kilograms) and relatively low cost (essential when deploying several identical speceborne platforms). Moreover, the micro-satellite solution clearly addresses the choice of small passive sensors with small size, low weight and power consumption, features which cannot be usually satisfied by active sensors. In this respect, MMW technology is the most compatible with the specifications and constraints of micro-satellites. In this work, we will discuss the numerical results of a feasibility study aimed at designing a Flower elliptical constellation of 3 micro-satellite millimeter-wave radiometers for pseudo-geostationary atmospheric observations over the Mediterranean region. The Flower constellation will be optimized in such a way to simulate a pseudo-geostationary observation of the Mediterranean area with an observation repetition time less than 2 hours. The mission requirements request the retrieval of thermodinamical and hydrological properties of the troposphere, specifically temperature profiles, integrated water vapor and cloud liquid content, rainfall and snowfall. Several configurations of the MMW radiometer multi-band channels will be discussed, pointing out the trade-off between performances and complexity. Integrated estimation algorithms, based on a Bayesian approache, will be illustrated to retrieve the requested atmospheric parameters, discussing its sensitivity to sensor radiometric precision and accuracy within each frequency-set configuration. After this numerical study, a review of the mission requirements and specifications will be also proposed.

An integrated photocatalytic microfluidic platform enabling total phosphorus digestion

NASA Astrophysics Data System (ADS)

Tong, Jianhua; Dong, Tian; Bian, Chao; Wang, Minrui; Wang, Fangfang; Bai, Yin; Xia, Shanhong

2015-02-01

This paper presents an integrated thermally assisted photocatalytic microfluidic chip and its application to the digestion of total phosphorus (TP) in freshwater. A micro heater, a micro temperature sensor, thermal-isolation channels and a polymethylsiloxane (PDMS) reaction chamber were fabricated on the microfluidic chip. Nano-TiO2 film sputtered on the surface of silicon in the reaction area was used as the photocatalyst, and a micro ultraviolet A-ray-light-emitting diode (UVA-LED) array fabricated by MEMS technology were attached to the top of reaction chamber for TP degradation. In this study, sodium tripolyphosphate (Na5P3O10) and sodium glycerophosphate (C3H7Na2O6P) were chosen as the typical components of TP, and these water samples were digested under UVA light irradiation and heating at the same time. Compared with the conventional high-temperature TP digestion which works at 120 °C for 30 min, the thermally assisted UVA digestion method could work at relatively low temperature, and the power consumption is decreased to less than 2 W. Since this digestion method could work without an oxidizing reagent, it is compatible with the electrochemical detection process, which makes it possible to achieve a fully functional detection chip by integrating the digestion unit and electrochemical microelectrode, to realize the on-chip detection of TP, and other water quality parameters such as total nitrogen and chemical oxygen demand.

Advanced Nanoporous Materials for Micro-Gravimetric Sensing to Trace-Level Bio/Chemical Molecules

PubMed Central

Xu, Pengcheng; Li, Xinxin; Yu, Haitao; Xu, Tiegang

2014-01-01

Functionalized nanoporous materials have been developed recently as bio/chemical sensing materials. Due to the huge specific surface of the nano-materials for molecular adsorption, high hopes have been placed on gravimetric detection with micro/nano resonant cantilevers for ultra-sensitive sensing of low-concentration bio/chemical substances. In order to enhance selectivity of the gravimetric resonant sensors to the target molecules, it is crucial to modify specific groups onto the pore-surface of the nano-materials. By loading the nanoporous sensing material onto the desired region of the mass-type transducers like resonant cantilevers, the micro-gravimetric bio/chemical sensors can be formed. Recently, such micro-gravimetric bio/chemical sensors have been successfully applied for rapid or on-the-spot detection of various bio/chemical molecules at the trace-concentration level. The applicable nanoporous sensing materials include mesoporous silica, zeolite, nanoporous graphene oxide (GO) and so on. This review article focuses on the recent achievements in design, preparation, functionalization and characterization of advanced nanoporous sensing materials for micro-gravimetric bio/chemical sensing. PMID:25313499

Performance of horn-coupled transition edge sensors for L- and S-band optical detection on the SAFARI instrument

NASA Astrophysics Data System (ADS)

Goldie, D. J.; Glowacka, D. M.; Withington, S.; Chen, Jiajun; Ade, P. A. R.; Morozov, D.; Sudiwala, R.; Trappe, N. A.; Quaranta, O.

2016-07-01

We describe the geometry, architecture, dark- and optical performance of ultra-low-noise transition edge sensors as THz detectors for the SAFARI instrument. The TESs are fabricated from superconducting Mo/Au bilayers coupled to impedance-matched superconducting β-phase Ta thin-film absorbers. The detectors have phonon-limited dark noise equivalent powers of order 0.5 - 1.0 aW/ √ Hz and saturation powers of order 20 - 40 fW. The low temperature test configuration incorporating micro-machined backshorts is also described, and construction and typical performance characteristics for the optical load are shown. We report preliminary measurements of the optical performance of these TESs for two SAFARI bands; L-band at 110 - 210 μm and S-band 34 - 60 μm .

Perovskite LaBaCo2O5+δ (LBCO) single-crystal thin films for pressure sensing applications

NASA Astrophysics Data System (ADS)

Ma, Y. J.; Xiao, J. Y.; Zhang, Q. Y.; Ma, C. Y.; Jiang, X. N.; Wu, B. Y.; Zeng, X. Y.

2018-04-01

Perovskite LaBaCo2O5+δ (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 μm, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 × 10-2 to 105 Pa with a real dynamic range of 3 to 2 × 103 Pa.

Microfluidic biosensing systems. Part I. Development and optimisation of enzymatic chemiluminescent micro-biosensors based on silicon microchips.

PubMed

Davidsson, Richard; Genin, Frédéric; Bengtsson, Martin; Laurell, Thomas; Emnéus, Jenny

2004-10-01

Chemiluminescent (CL) enzyme-based flow-through microchip biosensors (micro-biosensors) for detection of glucose and ethanol were developed for the purpose of monitoring real-time production and release of glucose and ethanol from microchip immobilised yeast cells. Part I of this study focuses on the development and optimisation of the micro-biosensors in a microfluidic sequential injection analysis (microSIA) system. Glucose oxidase (GOX) or alcohol oxidase (AOX) was co-immobilised with horseradish peroxidase (HRP) on porous silicon flow through microchips. The hydrogen peroxide produced from oxidation of the corresponding analyte (glucose or ethanol) took part in the chemiluminescent (CL) oxidation of luminol catalysed by HRP enhanced by addition of p-iodophenol (PIP). All steps in the microSIA system, including control of syringe pump, multiposition valve (MPV) and data readout, were computer controlled. The influence of flow rate and luminol- and PIP concentration were investigated using a 2(3)-factor experiment using the GOX-HRP sensor. It was found that all estimated single factors and the highest order of interaction were significant. The optimum was found at 250 microM luminol and 150 microM PIP at a flow rate of 18 microl min(-1), the latter as a compromise between signal intensity and analysis time. Using the optimised system settings one sample was processed within 5 min. Two different immobilisation chemistries were investigated for both micro-biosensors based on 3-aminopropyltriethoxsilane (APTS)- or polyethylenimine (PEI) functionalisation followed by glutaraldehyde (GA) activation. GOX-HRP micro-biosensors responded linear in a log-log format within the range 10-1000 microM glucose. Both had an operational stability of at least 8 days, but the PEI-GOX-HRP sensor was more sensitive. The AOX-HRP micro-biosensors responded linear (log-log) in the range between 1 and 10 mM ethanol, but the PEI-AOX-HRP sensor was in general more sensitive. Both sensors had an operational stability of at least 8 h, but with a half-life of 2-3 days.

Formaldehyde gas sensor based on TiO2 thin membrane integrated with nano silicon structure

NASA Astrophysics Data System (ADS)

Zheng, Xuan; Ming, An-jie; Ye, Li; Chen, Feng-hua; Sun, Xi-long; Liu, Wei-bing; Li, Chao-bo; Ou, Wen; Wang, Wei-bing; Chen, Da-peng

2016-07-01

An innovative formaldehyde gas sensor based on thin membrane type metal oxide of TiO2 layer was designed and fabricated. This sensor under ultraviolet (UV) light emitting diode (LED) illumination exhibits a higher response to formaldehyde than that without UV illumination at low temperature. The sensitivities of the sensor under steady working condition were calculated for different gas concentrations. The sensitivity to formaldehyde of 7.14 mg/m3 is about 15.91 under UV illumination with response time of 580 s and recovery time of 500 s. The device was fabricated through micro-electro-mechanical system (MEMS) processing technology. First, plasma immersion ion implantation (PIII) was adopted to form black polysilicon, then a nanoscale TiO2 membrane with thickness of 53 nm was deposited by DC reactive magnetron sputtering to obtain the sensing layer. By such fabrication approaches, the nanoscale polysilicon presents continuous rough surface with thickness of 50 nm, which could improve the porosity of the sensing membrane. The fabrication process can be mass-produced for the MEMS process compatibility.

Fabrication and Characterization of Flexible and Miniaturized Humidity Sensors Using Screen-Printed TiO2 Nanoparticles as Sensitive Layer

PubMed Central

Dubourg, Georges; Segkos, Apostolos; Katona, Jaroslav; Radović, Marko; Savić, Slavica; Crnojević-Bengin, Vesna

2017-01-01

This paper describes the fabrication and the characterization of an original example of a miniaturized resistive-type humidity sensor, printed on flexible substrate in a large-scale manner. The fabrication process involves laser ablation for the design of interdigitated electrodes on PET (Poly-Ethylene Terephthalate) substrate and a screen-printing process for the deposition of the sensitive material, which is based on TiO2 nanoparticles. The laser ablation process was carefully optimized to obtain micro-scale and well-resolved electrodes on PET substrate. A functional paste based on cellulose was prepared in order to allow the precise screen-printing of the TiO2 nanoparticles as sensing material on the top of the electrodes. The current against voltage (I–V) characteristic of the sensor showed good linearity and potential for low-power operation. The results of a humidity-sensing investigation and mechanical testing showed that the fabricated miniaturized sensors have excellent mechanical stability, sensing characteristics, good repeatability, and relatively fast response/recovery times operating at room temperature. PMID:28800063

2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback

NASA Astrophysics Data System (ADS)

Lani, S.; Bayat, D.; Despont, M.

2015-02-01

An integrated position sensor for a dual-axis electromagnetic tilting mirror is presented. This tilting mirror is composed of a silicon based mirror directly assembled on a silicon membrane supported by flexible beams. The position sensors are constituted by 4 Wheatstone bridges of piezoresistors which are fabricated by doping locally the flexible beams. A permanent magnet is attached to the membrane and the scanner is mounted above planar coils deposited on a ceramic substrate to achieve electromagnetic actuation. The performances of the piezoresistive sensors are evaluated by measuring the output signal of the piezoresistors as a function of the tilt of the mirror and the temperature. White light interferometry was performed for all measurement to measure the exact tilt angle. The minimum detectable angle with such sensors was 30µrad (around 13bits) in the range of the minimum resolution of the interferometer. The tilt reproducibility was 0.0186%, obtained by measuring the tilt after repeated actuations with a coil current of 50mA during 30 min and the stability over time was 0.05% in 1h without actuation. The maximum measured tilt angle was 6° (mechanical) limited by nonlinearity of the MEMS system.

Low cost environmental sensors for Spaceflight : NMP Space Environmental Monitor (SEM) requirements

NASA Technical Reports Server (NTRS)

Garrett, Henry B.; Buelher, Martin G.; Brinza, D.; Patel, J. U.

2005-01-01

An outstanding problem in spaceflight is the lack of adequate sensors for monitoring the space environment and its effects on engineering systems. By adequate, we mean low cost in terms of mission impact (e.g., low price, low mass/size, low power, low data rate, and low design impact). The New Millennium Program (NMP) is investigating the development of such a low-cost Space Environmental Monitor (SEM) package for inclusion on its technology validation flights. This effort follows from the need by NMP to characterize the space environment during testing so that potential users can extrapolate the test results to end-use conditions. The immediate objective of this effort is to develop a small diagnostic sensor package that could be obtained from commercial sources. Environments being considered are: contamination, atomic oxygen, ionizing radiation, cosmic radiation, EMI, and temperature. This talk describes the requirements and rational for selecting these environments and reviews a preliminary design that includes a micro-controller data logger with data storage and interfaces to the sensors and spacecraft. If successful, such a sensor package could be the basis of a unique, long term program for monitoring the effects of the space environment on spacecraft systems.

Low Cost Environmental Sensors for Spaceflight: NMP Space Environmental Monitor (SEM) Requirements

NASA Technical Reports Server (NTRS)

Garrett, Henry B.; Buehler, Martin G.; Brinza, D.; Patel, J. U.

2005-01-01

An outstanding problem in spaceflight is the lack of adequate sensors for monitoring the space environment and its effects on engineering systems. By adequate, we mean low cost in terms of mission impact (e.g., low price, low mass/size, low power, low data rate, and low design impact). The New Millennium Program (NMP) is investigating the development of such a low-cost Space Environmental Monitor (SEM) package for inclusion on its technology validation flights. This effort follows from the need by NMP to characterize the space environment during testing so that potential users can extrapolate the test results to end-use conditions. The immediate objective of this effort is to develop a small diagnostic sensor package that could be obtained from commercial sources. Environments being considered are: contamination, atomic oxygen, ionizing radiation, cosmic radiation, EMI, and temperature. This talk describes the requirements and rational for selecting these environments and reviews a preliminary design that includes a micro-controller data logger with data storage and interfaces to the sensors and spacecraft. If successful, such a sensor package could be the basis of a unique, long term program for monitoring the effects of the space environment on spacecraft systems.

An affordable and accurate conductivity probe for density measurements in stratified flows

NASA Astrophysics Data System (ADS)

Carminati, Marco; Luzzatto-Fegiz, Paolo

2015-11-01

In stratified flow experiments, conductivity (combined with temperature) is often used to measure density. The probes typically used can provide very fine spatial scales, but can be fragile, expensive to replace, and sensitive to environmental noise. A complementary instrument, comprising a low-cost conductivity probe, would prove valuable in a wide range of applications where resolving extremely small spatial scales is not needed. We propose using micro-USB cables as the actual conductivity sensors. By removing the metallic shield from a micro-B connector, 5 gold-plated microelectrodes are exposed and available for 4-wire measurements. These have a cell constant ~550m-1, an intrinsic thermal noise of at most 30pA/Hz1/2, as well as sub-millisecond time response, making them highly suitable for many stratified flow measurements. In addition, we present the design of a custom electronic board (Arduino-based and Matlab-controlled) for simultaneous acquisition from 4 sensors, with resolution (in conductivity, and resulting density) exceeding the performance of typical existing probes. We illustrate the use of our conductivity-measuring system through stratified flow experiments, and describe plans to release simple instructions to construct our complete system for around 200.

Engineering biomimetic hair bundle sensors for underwater sensing applications

NASA Astrophysics Data System (ADS)

Kottapalli, Ajay Giri Prakash; Asadnia, Mohsen; Karavitaki, K. Domenica; Warkiani, Majid Ebrahimi; Miao, Jianmin; Corey, David P.; Triantafyllou, Michael

2018-05-01

We present the fabrication of an artificial MEMS hair bundle sensor designed to approximate the structural and functional principles of the flow-sensing bundles found in fish neuromast hair cells. The sensor consists of micro-pillars of graded height connected with piezoelectric nanofiber "tip-links" and encapsulated by a hydrogel cupula-like structure. Fluid drag force actuates the hydrogel cupula and deflects the micro-pillar bundle, stretching the nanofibers and generating electric charges. These biomimetic sensors achieve an ultrahigh sensitivity of 0.286 mV/(mm/s) and an extremely low threshold detection limit of 8.24 µm/s. A complete version of this paper has been published [1].

Advanced electro-mechanical micro-shutters for thermal infrared night vision imaging and targeting systems

NASA Astrophysics Data System (ADS)

Durfee, David; Johnson, Walter; McLeod, Scott

2007-04-01

Un-cooled microbolometer sensors used in modern infrared night vision systems such as driver vehicle enhancement (DVE) or thermal weapons sights (TWS) require a mechanical shutter. Although much consideration is given to the performance requirements of the sensor, supporting electronic components and imaging optics, the shutter technology required to survive in combat is typically the last consideration in the system design. Electro-mechanical shutters used in military IR applications must be reliable in temperature extremes from a low temperature of -40°C to a high temperature of +70°C. They must be extremely light weight while having the ability to withstand the high vibration and shock forces associated with systems mounted in military combat vehicles, weapon telescopic sights, or downed unmanned aerial vehicles (UAV). Electro-mechanical shutters must have minimal power consumption and contain circuitry integrated into the shutter to manage battery power while simultaneously adapting to changes in electrical component operating parameters caused by extreme temperature variations. The technology required to produce a miniature electro-mechanical shutter capable of fitting into a rifle scope with these capabilities requires innovations in mechanical design, material science, and electronics. This paper describes a new, miniature electro-mechanical shutter technology with integrated power management electronics designed for extreme service infra-red night vision systems.

Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

PubMed Central

Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang

2009-01-01

The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0–300 kPa. PMID:22303167

Capacitive micro pressure sensor integrated with a ring oscillator circuit on chip.

PubMed

Dai, Ching-Liang; Lu, Po-Wei; Chang, Chienliu; Liu, Cheng-Yang

2009-01-01

The study investigates a capacitive micro pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode, and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process. The post-process uses etchants to etch the sacrificial layers, and to release the membranes. The advantages of the post-process include easy execution and low cost. Experimental results reveal that the pressure sensor has a high sensitivity of 7 Hz/Pa in the pressure range of 0-300 kPa.

A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

PubMed Central

Huang, Che-Wei; Huang, Yu-Jie; Lu, Shey-Shi; Lin, Chih-Ting

2012-01-01

A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.

Micro-electromechanical sensors in the analytical field.

PubMed

Zougagh, Mohammed; Ríos, Angel

2009-07-01

Micro- and nano-electromechanical systems (MEMS and NEMS) for use as sensors represent one of the most exciting new fields in analytical chemistry today. These systems are advantageous over currently available non-miniaturized sensors, such as quartz crystal microbalances, thickness shear mode resonators, and flexural plate wave oscillators, because of their high sensitivity, low cost and easy integration into automated systems. In this article, we present and discuss the evolution in the use of MEMS and NEMS, which are basically cantilever-type sensors, as good analytical tools for a wide variety of applications. We discuss the analytical features and the practical potential of micro(nano)-cantilever sensors, which combine the synergetic advantages of selectivity, provided by their functionalization, and the high sensitivity, which is attributed largely to the extremely small size of the sensing element. An insight is given into the different types of functionalization and detection strategies and a critical discussion is presented on the existing state of the art concerning the applications reported for mechanical microsensors. New developments and the possibilities for routine work in the near future are also covered.

Microscope-on-Chip Using Micro-Channel and Solid State Image Sensors

NASA Technical Reports Server (NTRS)

Wang, Yu

2000-01-01

Recently, Jet Propulsion Laboratory has invented and developed a miniature optical microscope, microscope-on-chip using micro-channel and solid state image sensors. It is lightweight, low-power, fast speed instrument, it has no image lens, does not need focus adjustment, and the total mass is less than 100g. A prototype has been built and demonstrated at JPL.

Micro-array versus nano-array platforms: a comparative study for ODN detection based on SPR enhanced ellipsometry

NASA Astrophysics Data System (ADS)

Celen, Burcu; Demirel, Gökhan; Piskin, Erhan

2011-04-01

The rapid and sensitive detection of DNA has recently attracted worldwide attention for a variety of disease diagnoses and detection of harmful bacteria in food and drink. In this paper, we carried out a comparative study based on surface plasmon resonance enhanced ellipsometry (SPREE) for the detection of oligodeoxynucleotides (ODNs) using micro- and nano-array platforms. The micro-arrayed surfaces were fabricated by a photolithography approach using different types of mask having varying size and shape. Well-ordered arrays of high aspect ratio polymeric nanotubes were also obtained using high molecular weight polystyrene (PS) and anodic aluminum oxide (AAO) membranes having 200 nm pore diameters. The SPREE sensors were then prepared by direct coupling of thiolated probe-ODNs, which contain suitable spacer arms, on gold-coated micro- and nano-arrayed surfaces. We experimentally demonstrated that, for the first time, gold-coated free standing polymeric nano-arrayed platforms can easily be produced and lead to a significant sensor sensitivity gain compared to that of the conventional SPREE surfaces of about four times. We believe that such an enhancement in sensor response could be useful for next generation sensor systems.

Pick-and-place process for sensitivity improvement of the capacitive type CMOS MEMS 2-axis tilt sensor

NASA Astrophysics Data System (ADS)

Chang, Chun-I.; Tsai, Ming-Han; Liu, Yu-Chia; Sun, Chih-Ming; Fang, Weileun

2013-09-01

This study exploits the foundry available complimentary metal-oxide-semiconductor (CMOS) process and the packaging house available pick-and-place technology to implement a capacitive type micromachined 2-axis tilt sensor. The suspended micro mechanical structures such as the spring, stage and sensing electrodes are fabricated using the CMOS microelectromechanical systems (MEMS) processes. A bulk block is assembled onto the suspended stage by pick-and-place technology to increase the proof-mass of the tilt sensor. The low temperature UV-glue dispensing and curing processes are employed to bond the block onto the stage. Thus, the sensitivity of the CMOS MEMS capacitive type 2-axis tilt sensor is significantly improved. In application, this study successfully demonstrates the bonding of a bulk solder ball of 100 µm in diameter with a 2-axis tilt sensor fabricated using the standard TSMC 0.35 µm 2P4M CMOS process. Measurements show the sensitivities of the 2-axis tilt sensor are increased for 2.06-fold (x-axis) and 1.78-fold (y-axis) after adding the solder ball. Note that the sensitivity can be further improved by reducing the parasitic capacitance and the mismatch of sensing electrodes caused by the solder ball.

Aerospace Sensor Systems: From Sensor Development To Vehicle Application

NASA Technical Reports Server (NTRS)

Hunter, Gary W.

2008-01-01

This paper presents an overview of years of sensor system development and application for aerospace systems. The emphasis of this work is on developing advanced capabilities for measurement and control of aeropropulsion and crew vehicle systems as well as monitoring the safety of those systems. Specific areas of work include chemical species sensors, thin film thermocouples and strain gages, heat flux gages, fuel gages, SiC based electronic devices and sensors, space qualified electronics, and MicroElectroMechanical Systems (MEMS) as well as integrated and multifunctional sensor systems. Each sensor type has its own technical challenges related to integration and reliability in a given application. The general approach has been to develop base sensor technology using microfabrication techniques, integrate sensors with "smart" hardware and software, and demonstrate those systems in a range of aerospace applications. Descriptions of the sensor elements, their integration into sensors systems, and examples of sensor system applications will be discussed. Finally, suggestions related to the future of sensor technology will be given. It is concluded that smart micro/nano sensor technology can revolutionize aerospace applications, but significant challenges exist in maturing the technology and demonstrating its value in real-life applications.

MicroSensors Systems: detection of a dismounted threat

NASA Astrophysics Data System (ADS)

Davis, Bill; Berglund, Victor; Falkofske, Dwight; Krantz, Brian

2005-05-01

The Micro Sensor System (MSS) is a layered sensor network with the goal of detecting dismounted threats approaching high value assets. A low power unattended ground sensor network is dependant on a network protocol for efficiency in order to minimize data transmissions after network establishment. The reduction of network 'chattiness' is a primary driver for minimizing power consumption and is a factor in establishing a low probability of detection and interception. The MSS has developed a unique protocol to meet these challenges. Unattended ground sensor systems are most likely dependant on batteries for power which due to size determines the ability of the sensor to be concealed after placement. To minimize power requirements, overcome size limitations, and maintain a low system cost the MSS utilizes advanced manufacturing processes know as Fluidic Self-Assembly and Chip Scale Packaging. The type of sensing element and the ability to sense various phenomenologies (particularly magnetic) at ranges greater than a few meters limits the effectiveness of a system. The MicroSensor System will overcome these limitations by deploying large numbers of low cost sensors, which is made possible by the advanced manufacturing process used in production of the sensors. The MSS program will provide unprecedented levels of real-time battlefield information which greatly enhances combat situational awareness when integrated with the existing Command, Control, Communications, Computers, Intelligence, Surveillance and Reconnaissance (C4ISR) infrastructure. This system will provide an important boost to realizing the information dominant, network-centric objective of Joint Vision 2020.

Scanning hall probe microscopy (SHPM) using quartz crystal AFM feedback.

PubMed

Dede, M; Urkmen, K; Girişen, O; Atabak, M; Oral, A; Farrer, I; Ritchie, D

2008-02-01

Scanning Hall Probe Microscopy (SHPM) is a quantitative and non-invasive technique for imaging localized surface magnetic field fluctuations such as ferromagnetic domains with high spatial and magnetic field resolution of approximately 50 nm and 7 mG/Hz(1/2) at room temperature. In the SHPM technique, scanning tunneling microscope (STM) or atomic force microscope (AFM) feedback is used to keep the Hall sensor in close proximity of the sample surface. However, STM tracking SHPM requires conductive samples; therefore the insulating substrates have to be coated with a thin layer of gold. This constraint can be eliminated with the AFM feedback using sophisticated Hall probes that are integrated with AFM cantilevers. However it is very difficult to micro fabricate these sensors. In this work, we have eliminated the difficulty in the cantilever-Hall probe integration process, just by gluing a Hall Probe chip to a quartz crystal tuning fork force sensor. The Hall sensor chip is simply glued at the end of a 32.768 kHz or 100 kHz Quartz crystal, which is used as force sensor. An LT-SHPM system is used to scan the samples. The sensor assembly is dithered at the resonance frequency using a digital Phase Locked Loop circuit and frequency shifts are used for AFM tracking. SHPM electronics is modified to detect AFM topography and the frequency shift, along with the magnetic field image. Magnetic domains and topography of an Iron Garnet thin film crystal, NdFeB demagnetised magnet and hard disk samples are presented at room temperature. The performance is found to be comparable with the SHPM using STM feedback.

HIgh-Q Optical Micro-cavity Resonators as High Sensitive Bio-chemical and Ultrasonic Sensors

NASA Astrophysics Data System (ADS)

Ling, Tao

Optical micro-cavity resonators have quickly emerged in the past few years as a new sensing platform in a wide range of applications, such as bio-chemical molecular detection, environmental monitoring, acoustic and electromagnetic waves detection. In this thesis, we will mainly focus on developing high sensitivity silica micro-tube resonator bio-chemical sensors and high sensitivity polymer micro-ring resonator acoustic sensors. In high sensitivity silica micro-tube resonator bio-chemical sensors part: We first demonstrated a prism coupled silica micro-tube bio-chemical sensing platform to overcome the reliability problem in a fiber coupled thin wall silica micro-tube sensing platform. In refractive index sensing experiment, a unique resonance mode with sensitivity around 600nm/refractive index unit (RIU) has been observed. Surface sensing experiments also have been performed in this platform to detect lipid monolayer, lipid bilayer, electrostatic self assemble layer-by-layer as well as the interaction between the lipid bilayer and proteins. Then a theoretical study on various sensing properties on the silica micro-tube based sensing platform has been realized. Furthermore, we have proposed a coupled cavity system to further enhance the device's sensitivity above 1000nm/RIU. In high sensitivity polymer micro-ring resonator acoustic sensors part: We first presented a simplified fabrication process and realized a polymer microring with a Q factor around 6000. The fabricated device has been used to detect acoustic wave with noise equivalent pressure (NEP) around 230Pa over 1-75MHz frequency rang, which is comparable to state-of-art piezoelectric transducer and the device's frequency response also have been characterized to be up to 90MHz. A new fabrication process combined with resist reflow and thermal oxidation process has been used to improve the Q factor up to 10 5 and the device's NEP has been tested to be around 88Pa over 1-75MHz range. Further improving the device's Q factor has been realized by shifting the device's working wavelength to near-visible wavelength and further reducing the device's sidewall roughness. A record new high Q-˜x105 has been measured and the device's NEP as low as 21Pa has been measured. Furthermore, a smaller size polymer microring device has been developed and fabricated to realize larger angle beam forming applications.

Silicon Nanotips Antireflection Surface for Micro Sun Sensor

NASA Technical Reports Server (NTRS)

Bae, Sam Y.; Lee, Choonsup; Mobasser, Sohrab; Manohara, Harish

2006-01-01

We have developed a new technique to fabricate antireflection surface using silicon nano-tips for use on a micro sun sensor for Mars rovers. We have achieved randomly distributed nano-tips of radius spanning from 20 nm to 100 nm and aspect ratio of 200 using a two-step dry etching process. The 30(deg) specular reflectance at the target wavelength of 1 (mu)m is only about 0.09 %, nearly three orders of magnitude lower than that of bare silicon, and the hemispherical reflectance is 8%. By changing the density and aspect ratio of these nanotips, the change in reflectance is demonstrated. Using surfaces covered with these nano-tips, the critical problem of ghost images that are caused by multiple internal reflections in a micro sun sensor was solved.

A Micro-Computed Tomography Technique to Study the Quality of Fibre Optics Embedded in Composite Materials

PubMed Central

Chiesura, Gabriele; Luyckx, Geert; Voet, Eli; Lammens, Nicolas; Van Paepegem, Wim; Degrieck, Joris; Dierick, Manuel; Van Hoorebeke, Luc; Vanderniepen, Pieter; Sulejmani, Sanne; Sonnenfeld, Camille; Geernaert, Thomas; Berghmans, Francis

2015-01-01

Quality of embedment of optical fibre sensors in carbon fibre-reinforced polymers plays an important role in the resultant properties of the composite, as well as for the correct monitoring of the structure. Therefore, availability of a tool able to check the optical fibre sensor-composite interaction becomes essential. High-resolution 3D X-ray Micro-Computed Tomography, or Micro-CT, is a relatively new non-destructive inspection technique which enables investigations of the internal structure of a sample without actually compromising its integrity. In this work the feasibility of inspecting the position, the orientation and, more generally, the quality of the embedment of an optical fibre sensor in a carbon fibre reinforced laminate at unit cell level have been proven. PMID:25961383

Fly eye radar or micro-radar sensor technology

NASA Astrophysics Data System (ADS)

Molchanov, Pavlo; Asmolova, Olga

2014-05-01

To compensate for its eye's inability to point its eye at a target, the fly's eye consists of multiple angularly spaced sensors giving the fly the wide-area visual coverage it needs to detect and avoid the threats around him. Based on a similar concept a revolutionary new micro-radar sensor technology is proposed for detecting and tracking ground and/or airborne low profile low altitude targets in harsh urban environments. Distributed along a border or around a protected object (military facility and buildings, camp, stadium) small size, low power unattended radar sensors can be used for target detection and tracking, threat warning, pre-shot sniper protection and provides effective support for homeland security. In addition it can provide 3D recognition and targets classification due to its use of five orders more pulses than any scanning radar to each space point, by using few points of view, diversity signals and intelligent processing. The application of an array of directional antennas eliminates the need for a mechanical scanning antenna or phase processor. It radically decreases radar size and increases bearing accuracy several folds. The proposed micro-radar sensors can be easy connected to one or several operators by point-to-point invisible protected communication. The directional antennas have higher gain, can be multi-frequency and connected to a multi-functional network. Fly eye micro-radars are inexpensive, can be expendable and will reduce cost of defense.

Iron oxide/carbon black (Fe2O3/CB) composite electrode for the detection of reduced nicotinamide cofactors using an amperometric method under a low overpotential.

PubMed

Kim, Yang Hee; Kim, Taeho; Ryu, Ji Heon; Yoo, Young Je

2010-01-15

An amperometric biosensor for the detection of the reduced nicotinamide cofactors NADH and NADPH was designed, based on the electrochemical oxidation of NAD(P)H with an iron oxide/carbon black composite (Fe(2)O(3)/CB) electrode. The electrode exhibited excellent performances in that it led to a substantial decrease in the overpotential of electrochemical NADH oxidation. Iron oxide plays a significant role as a catalyst for NADH oxidation and the reaction occurs at +0.00 V (vs. Ag/AgCl). The method of the sensor construction is very simple and the sensor performed well, giving high sensitivity, high stability, and a broad detection range. The sensitivity of this system is 2.54 microA mM(-1) and the limit of detection (S/N=3) is 10 microM. A linear range was observed between 10 microM and 1000 microM of NADH (R(2)=0.993), which is preferable to that of the previous studies. The Fe(2)O(3)/CB electrode also oxidizes NADPH under the same condition and can be applied as an NADPH sensor. Moreover, when the sensor system was integrated into a dehydrogenase-based sensor system, it also showed a good sensing performance. Copyright 2009 Elsevier B.V. All rights reserved.

Semiconductor-metal graded-index composite thin films for infrared applications

NASA Technical Reports Server (NTRS)

Lamb, James L.; Nagendra, C. L.

1994-01-01

Theoretical/experimental studies have been carried out on germanium:silver (Ge:Ag) graded-index composite thin films which demonstrate that graded coatings, consisting of varied concentrations of Ag with respect to the Ge film thickness, exhibit different optical properties ranging from selective infrared (IR) reflectance to broadband IR absorptance. The graded coatings have been produced by dc magnetron cosputtering of Ge and Ag and the spectral properties are found to be stable against temperature. The coatings have been applied to an infrared tunnel sensor (micro-Golay cell) to improve the device performance.

Investigation on micromachining technologies for the realization of LTCC devices and systems

NASA Astrophysics Data System (ADS)

Haas, T.; Zeilmann, C.; Bittner, A.; Schmid, U.

2011-06-01

Low temperature co-fired ceramics (LTCC) has established as a widespread platform for advanced functional ceramic devices in different applications, such as in the space and aviation sector, for micro machined sensors as well as in micro fluidics. This is due to high reliability, excellent physical properties, especially in the high frequency range, and the possibility to integrate passive components in the monolithic LTCC body, offering the potential for a high degree of miniaturisation. However, for further improvement of this technology and for an ongoing increase of the integration level, the realization of miniaturized structures is of utmost importance. Therefore, novel techniques for micro-machining are required providing channel structures and cavities inside the glass-ceramic body, enabling for further application scenarios. Those techniques are punching, laser cutting and embossing. One of the most limitations of LTCC is the poor thermal conductivity. Hence, the possibility to integrate channels enables innovative active cooling approaches using fluidic media for heat critical devices. Doing so, a by far better cooling effect can be achieved than by passive devices as heat spreaders or heat sinks. Furthermore, the realization of mechanic devices as integrated pressure sensors for operation under harsh environmental conditions can be realized by integrating the membrane directly into the ceramic body. Finally, for high power devices substantial improvement can be provided by filling those channel structures with electrical conductive material, so that the resistivity can be decreased drastically without affecting the topography of the ceramics.

Development of a Personal Integrated Environmental Monitoring System

PubMed Central

Wong, Man Sing; Yip, Tsan Pong; Mok, Esmond

2014-01-01

Environmental pollution in the urban areas of Hong Kong has become a serious public issue but most urban inhabitants have no means of judging their own living environment in terms of dangerous threshold and overall livability. Currently there exist many low-cost sensors such as ultra-violet, temperature and air quality sensors that provide reasonably accurate data quality. In this paper, the development and evaluation of Integrated Environmental Monitoring System (IEMS) are illustrated. This system consists of three components: (i) position determination and sensor data collection for real-time geospatial-based environmental monitoring; (ii) on-site data communication and visualization with the aid of an Android-based application; and (iii) data analysis on a web server. This system has shown to be working well during field tests in a bus journey and a construction site. It provides an effective service platform for collecting environmental data in near real-time, and raises the public awareness of environmental quality in micro-environments. PMID:25420154

Integrating Sensors into a Marine Drone for Bathymetric 3D Surveys in Shallow Waters.

PubMed

Giordano, Francesco; Mattei, Gaia; Parente, Claudio; Peluso, Francesco; Santamaria, Raffaele

2015-12-29

This paper demonstrates that accurate data concerning bathymetry as well as environmental conditions in shallow waters can be acquired using sensors that are integrated into the same marine vehicle. An open prototype of an unmanned surface vessel (USV) named MicroVeGA is described. The focus is on the main instruments installed on-board: a differential Global Position System (GPS) system and single beam echo sounder; inertial platform for attitude control; ultrasound obstacle-detection system with temperature control system; emerged and submerged video acquisition system. The results of two cases study are presented, both concerning areas (Sorrento Marina Grande and Marechiaro Harbour, both in the Gulf of Naples) characterized by a coastal physiography that impedes the execution of a bathymetric survey with traditional boats. In addition, those areas are critical because of the presence of submerged archaeological remains that produce rapid changes in depth values. The experiments confirm that the integration of the sensors improves the instruments' performance and survey accuracy.

A novel fiber optic Fabry-Perot structure with a micrometric diameter tip

NASA Astrophysics Data System (ADS)

Wang, Xingwei; Xu, Juncheng; Wang, Zhuang; Cooper, Kristie L.; Wang, Anbo

2006-08-01

This paper presents a novel fiber optic Fabry-Perot (FP) structure with a micrometric diameter tip. The fabrication of micro scale probes has become essential in intracellular surgery, in cell sensing, manipulation, and injection. It is of great importance in many fields, such as genetics, pathology, criminology, pharmacogenetics, and food safety. With such a tiny protrusion, the sensor can be inserted into micron size cells, say, for DNA analysis. With the FP cavity inside the fiber, the change of optical path difference (OPD) caused by the environment can be demodulated. In addition, the structure is intrinsically capable of temperature compensation. What's more, it is simple, cost-efficient, and compact. Last but not the least, the structure shows promise for nanometric protrusion. Once this goal is achieved, the sensor can be inserted into most cells. The sensor could pave the way for faster, more accurate medical diagnostic tests for countless conditions and may ultimately save lives by allowing earlier disease detection and intervention.

Integrating Sensors into a Marine Drone for Bathymetric 3D Surveys in Shallow Waters

PubMed Central

Giordano, Francesco; Mattei, Gaia; Parente, Claudio; Peluso, Francesco; Santamaria, Raffaele

2015-01-01

This paper demonstrates that accurate data concerning bathymetry as well as environmental conditions in shallow waters can be acquired using sensors that are integrated into the same marine vehicle. An open prototype of an unmanned surface vessel (USV) named MicroVeGA is described. The focus is on the main instruments installed on-board: a differential Global Position System (GPS) system and single beam echo sounder; inertial platform for attitude control; ultrasound obstacle-detection system with temperature control system; emerged and submerged video acquisition system. The results of two cases study are presented, both concerning areas (Sorrento Marina Grande and Marechiaro Harbour, both in the Gulf of Naples) characterized by a coastal physiography that impedes the execution of a bathymetric survey with traditional boats. In addition, those areas are critical because of the presence of submerged archaeological remains that produce rapid changes in depth values. The experiments confirm that the integration of the sensors improves the instruments’ performance and survey accuracy. PMID:26729117

Fiber optic microsensor technology for detection of hydrogen in space applications

NASA Astrophysics Data System (ADS)

Kazemi, Alex A.

2008-04-01

Optical hydrogen sensors are intrinsically safe since they produce no arc or spark in an explosive environment caused by the leakage of hydrogen. Safety remains a top priority since leakage of hydrogen in air during production, storage, transfer and distribution creates an explosive atmosphere for concentrations between 4% (v/v) - the lower explosive limit (LEL) and 74.5% (v/v) - the upper explosive limit (UEL) at room temperature and pressure. Being a very small molecule, hydrogen is prone to leakage through seals and micro-cracks. Hydrogen detection in space application is very challenging; public acceptance of hydrogen fuel would require the integration of a reliable hydrogen safety sensor. For detecting leakage of cryogenic fluids in spaceport facilities, Launch vehicle industry and aerospace agencies are currently relying heavily on the bulky mass spectrometers, which fill one or more equipment racks, and weigh several hundred kilograms. This paper describes the successful development and test of a multi-point fiber optic hydrogen sensor system during the static firing of an Evolved Expandable Launch Vehicle at NASA's Stennis Space Center. The system consisted of microsensors (optrodes) using hydrogen gas sensitive indicator incorporated onto an optically transparent porous substrate. The modular optoelectronics and multiplexing network system was designed and assembled utilizing a multi-channel optoelectronic sensor readout unit that monitored the hydrogen and temperature response of the individual optrodes in real-time and communicated this information via a serial communication port to a remote laptop computer. The paper would discuss the sensor design and performance data under field deployment conditions.

Investigation on onset voltage and conduction channel temperature in voltage-induced metal-insulator transition of vanadium dioxide

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yoon, Joonseok; Kim, Howon; Ju, Honglyoul, E-mail: tesl@yonsei.ac.kr

2016-03-28

The characteristics of onset voltages and conduction channel temperatures in the metal-insulator transition (MIT) of vanadium dioxide (VO{sub 2}) devices are investigated as a function of dimensions and ambient temperature. The MIT onset voltage varies from 18 V to 199 V as the device length increases from 5 to 80 μm at a fixed width of 100 μm. The estimated temperature at local conduction channel increases from 110 to 370 °C, which is higher than the MIT temperature (67 °C) of VO{sub 2}. A simple Joule-heating model is employed to explain voltage-induced MIT as well as to estimate temperatures of conduction channel appearing after MIT inmore » various-sized devices. Our findings on VO{sub 2} can be applied to micro- to nano-size tunable heating devices, e.g., microscale scanning thermal cantilevers and gas sensors.« less

Remote Sensing of Supercooled Cloud Layers in Cold Climate Using Ground Based Integrated Sensors System and Comparison with Pilot Reports and model forecasts

NASA Astrophysics Data System (ADS)

Boudala, Faisal; Wu, Di; Gultepe, Ismail; Anderson, Martha; turcotte, marie-france

2017-04-01

In-flight aircraft icing is one of the major weather hazards to aviation . It occurs when an aircraft passes through a cloud layer containing supercooled drops (SD). The SD in contact with the airframe freezes on the surface which degrades the performance of the aircraft.. Prediction of in-flight icing requires accurate prediction of SD sizes, liquid water content (LWC), and temperature. The current numerical weather predicting (NWP) models are not capable of making accurate prediction of SD sizes and associated LWC. Aircraft icing environment is normally studied by flying research aircraft, which is quite expensive. Thus, developing a ground based remote sensing system for detection of supercooled liquid clouds and characterization of their impact on severity of aircraft icing one of the important tasks for improving the NWPs based predictions and validations. In this respect, Environment and Climate Change Canada (ECCC) in cooperation with the Department of National Defense (DND) installed a number of specialized ground based remote sensing platforms and present weather sensors at Cold Lake, Alberta that includes a multi-channel microwave radiometer (MWR), K-band Micro Rain radar (MRR), Ceilometer, Parsivel distrometer and Vaisala PWD22 present weather sensor. In this study, a number of pilot reports confirming icing events and freezing precipitation that occurred at Cold Lake during the 2014-2016 winter periods and associated observation data for the same period are examined. The icing events are also examined using aircraft icing intensity estimated using ice accumulation model which is based on a cylindrical shape approximation of airfoil and the Canadian High Resolution Regional Deterministic Prediction System (HRDPS) model predicted LWC, median volume diameter and temperature. The results related to vertical atmospheric profiling conditions, surface observations, and the Canadian High Resolution Regional Deterministic Prediction System (HRDPS) model predictions are given. Preliminary results suggest that remote sensing and present weather sensors based observations of cloud SD regions can be used to describe micro and macro physical characteristics of the icing conditions. The model based icing intensity prediction reasonably agreed with the PIREPs and MWR observations.

Detection of Special Operations Forces Using Night Vision Devices

DOE Office of Scientific and Technical Information (OSTI.GOV)

Smith, C.M.

2001-10-22

Night vision devices, such image intensifiers and infrared imagers, are readily available to a host of nations, organizations, and individuals through international commerce. Once the trademark of special operations units, these devices are widely advertised to ''turn night into day''. In truth, they cannot accomplish this formidable task, but they do offer impressive enhancement of vision in limited light scenarios through electronically generated images. Image intensifiers and infrared imagers are both electronic devices for enhancing vision in the dark. However, each is based upon a totally different physical phenomenon. Image intensifiers amplify the available light energy whereas infrared imagers detectmore » the thermal energy radiated from all objects. Because of this, each device operates from energy which is present in a different portion of the electromagnetic spectrum. This leads to differences in the ability of each device to detect and/or identify objects. This report is a compilation of the available information on both state-of-the-art image intensifiers and infrared imagers. Image intensifiers developed in the United States, as well as some foreign made image intensifiers, are discussed. Image intensifiers are categorized according to their spectral response and sensitivity using the nomenclature of GEN I, GEN II, and GEN III. As the first generation of image intensifiers, GEN I, were large and of limited performance, this report will deal with only GEN II and GEN III equipment. Infrared imagers are generally categorized according to their spectral response, sensor materials, and related sensor operating temperature using the nomenclature Medium Wavelength Infrared (MWIR) Cooled and Long Wavelength Infrared (LWIR) Uncooled. MWIR Cooled refers to infrared imagers which operate in the 3 to 5 {micro}m wavelength electromagnetic spectral region and require either mechanical or thermoelectric coolers to keep the sensors operating at 77 K. LWIR Uncooled refers to infrared imagers which operate in the 8 to 12 {micro}m wavelength electromagnetic spectral region and do not require cooling below room temperature. Both commercial and military infrared sensors of these two types are discussed.« less

Development of a Novel Multispectral Instrument for Handheld and UAS Measurements of Surface Albedo; First Applications for Glaciers in the Peruvian Andes and for Nevada's Black Rock Desert

NASA Astrophysics Data System (ADS)

Boehmler, J. M.; Stevens, C.; Arnott, W. P.; Watts, A.; All, J.; Schmitt, C. G.

2017-12-01

Accurate atmospheric aerosol characteristics derived from satellite measurements are needed over a variety of land surfaces. Nonhomogeneous and bright surface reflectance across California and Nevada may be a contributing factor in the discrepancies observed between ground based and satellite-retrieved atmospheric aerosol optical depth (AOD). We developed and deployed a compact and portable instrument to measure albedo to evaluate a major factor that influences the accuracy of AOD retrievals. The instrument will be operated on an unmanned aircraft system (UAS) to control areal averaging for comparison with satellite derived albedo from the NASA Moderate Resolution Imaging Spectroradiometer (MODIS). A handheld version of the instrument was mounted on a trekking pole and used for obtaining in situ glacier albedo measurements in the Cordillera Blanca of Peru during the summer of 2017. The instrument weighs approximately 433 g and consists of two parts, a mountable, payload portion (300 g) which houses the sensors, and a handheld screen (133 g) to display real-time data from the payload portion. Both parts are powered by a 9V battery and run on a Teensy 3.6/3.2 microcontroller. To retrieve albedo, two micro-spectrometers manufactured by Hamamatsu Photonics, each with a spectral range of 340 -780 nm, are utilized; one for obtaining the downwelling solar radiation and the other for measuring the solar radiation reflected from the surface. Additional components on the instrument include temperature, pressure and humidity sensors with a one second time response; a GPS for position and altitude; an infrared sensor to measure ground temperature; a digital level and compass for orienting the instrument; a camera for taking photos of the sky and surface; a radio for two-way communication between the screen display and sensor payload; and a micro SD card for recording data. We will present the instrument design along with surface albedo measurements for glaciers of the Peruvian Andes in hand held operation, and for the Black Rock Desert of Nevada in UAS operation.

Ultra-precise micro-motion stage for optical scanning test

NASA Astrophysics Data System (ADS)

Chen, Wen; Zhang, Jianhuan; Jiang, Nan

2009-05-01

This study aims at the application of optical sensing technology in a 2D flexible hinge test stage. Optical fiber sensor which is manufactured taking advantage of the various unique properties of optical fiber, such as good electric insulation properties, resistance of electromagnetic disturbance, sparkless property and availability in flammable and explosive environment, has lots of good properties, such as high accuracy and wide dynamic range, repeatable, etc. and is applied in 2D flexible hinge stage driven by PZT. Several micro-bending structures are designed utilizing the characteristics of the flexible hinge stage. And through experiments, the optimal micro-bending tooth structure and the scope of displacement sensor trip under this optimal micro-bending tooth structure are derived. These experiments demonstrate that the application of optical fiber displacement sensor in 2D flexible hinge stage driven by PZT substantially broadens the dynamic testing range and improves the sensitivity of this apparatus. Driving accuracy and positioning stability are enhanced as well. [1,2

Semiselective Optoelectronic Sensors for Monitoring Microbes

NASA Technical Reports Server (NTRS)

Tabacco, Mary Beth; Chuang, Han; Taylor,Laura; Russo, Jaime

2003-01-01

Sensor systems are under development for use in real-time detection and quantitation of microbes in water without need for sampling. These systems include arrays of optical sensors; miniature, portable electronic data-acquisition circuits; and optoelectronic interfaces between the sensor arrays and data-acquisition circuits. These systems are intended for original use in long-term, inline monitoring of waterborne micro-organisms in water-reclamation systems aboard future spacecraft. They could also be adapted to similar terrestrial uses with respect to municipal water supplies, stored drinking water, and swimming water; for detecting low-level biological contamination in biotechnological, semiconductor, and pharmaceutical process streams; and in verifying the safety of foods and beverages. In addition, they could be adapted to monitoring of airborne microbes and of surfaces (e.g., to detect and/or quantitate biofilms). The designs of the sensors in these systems are based partly on those of sensors developed previously for monitoring airborne biological materials. The designs exploit molecular- recognition and fluorescence-spectroscopy techniques, such that in the presence of micro-organisms of interest, fluorescence signals change and the changes can be measured. These systems are characterized as semiselective because they respond to classes of micro-organisms and can be used to discriminate among the classes. This semiselectivity is a major aspect of the design: It is important to distinguish between (1) the principle of detection and quantitation of classes of micro-organisms by use of these sensors and (2) the principle of detection and quantitation of individual microbiological species by means of prior immuno-diagnostic and/or molecular-biology techniques. Detection of classes (in contradistinction to species) is particularly valuable when the exact nature of a contaminant is unknown.

Micro-Electromechanical Instrument and Systems Development at the Charles Stark Draper Laboratory

NASA Technical Reports Server (NTRS)

Connelly, J. H.; Gilmore, J. P.; Weinberg, M. S.

1995-01-01

Several generations of micromechanical gyros and accelerometers have been developed at Draper. Current design effort centers on tuning-fork gyro design and pendulous accelerometer configurations. Over 200 gyros of different generations have been packaged and tested. These units have successfully performed across a temperature range of -40 to 85 degrees C, and have survived 30,000-g shock tests along all axes. Draper is currently under contract to develop an integrated micro-mechanical inertial sensor assembly (MMISA) and global positioning system (GPS) receiver configuration. The ultimate projections for size, weight, and power for an MMISA, after electronic design of the application specific integrated circuit (ASIC ) is completed, are 2 x 2 x 0.5 cm, 5 gm, and less than 1 W, respectively. This paper describes the fabrication process, the current gyro and accelerometer designs, and system configurations.

Design of a Micro Cable Tunnel Inspection Robot

NASA Astrophysics Data System (ADS)

Song, Wei; Liu, Lei; Zhou, Xiaolong; Wang, Chengjiang

2016-11-01

As the ventilation system in cable tunnel is not perfect and the environment is closed, it is easy to accumulate toxic and harmful gas. It is a serious threat to the life safety of inspection staff. Therefore, a micro cable tunnel inspection robot is designed. The whole design plan mainly includes two parts: mechanical structure design and control system design. According to the functional requirements of the tunnel inspection robot, a wheel arm structure with crawler type is proposed. Some sensors are used to collect temperature, gas and image and transmit the information to the host computer in real time. The result shows the robot with crawler wheel arm structure has the advantages of small volume, quick action and high performance-price ratio. Besides, it has high obstacle crossing and avoidance ability and can adapt to a variety of complex cable tunnel environment.

Fault Diagnosis for Micro-Gas Turbine Engine Sensors via Wavelet Entropy

PubMed Central

Yu, Bing; Liu, Dongdong; Zhang, Tianhong

2011-01-01

Sensor fault diagnosis is necessary to ensure the normal operation of a gas turbine system. However, the existing methods require too many resources and this need can’t be satisfied in some occasions. Since the sensor readings are directly affected by sensor state, sensor fault diagnosis can be performed by extracting features of the measured signals. This paper proposes a novel fault diagnosis method for sensors based on wavelet entropy. Based on the wavelet theory, wavelet decomposition is utilized to decompose the signal in different scales. Then the instantaneous wavelet energy entropy (IWEE) and instantaneous wavelet singular entropy (IWSE) are defined based on the previous wavelet entropy theory. Subsequently, a fault diagnosis method for gas turbine sensors is proposed based on the results of a numerically simulated example. Then, experiments on this method are carried out on a real micro gas turbine engine. In the experiment, four types of faults with different magnitudes are presented. The experimental results show that the proposed method for sensor fault diagnosis is efficient. PMID:22163734

Fault diagnosis for micro-gas turbine engine sensors via wavelet entropy.

PubMed

Yu, Bing; Liu, Dongdong; Zhang, Tianhong

2011-01-01

Sensor fault diagnosis is necessary to ensure the normal operation of a gas turbine system. However, the existing methods require too many resources and this need can't be satisfied in some occasions. Since the sensor readings are directly affected by sensor state, sensor fault diagnosis can be performed by extracting features of the measured signals. This paper proposes a novel fault diagnosis method for sensors based on wavelet entropy. Based on the wavelet theory, wavelet decomposition is utilized to decompose the signal in different scales. Then the instantaneous wavelet energy entropy (IWEE) and instantaneous wavelet singular entropy (IWSE) are defined based on the previous wavelet entropy theory. Subsequently, a fault diagnosis method for gas turbine sensors is proposed based on the results of a numerically simulated example. Then, experiments on this method are carried out on a real micro gas turbine engine. In the experiment, four types of faults with different magnitudes are presented. The experimental results show that the proposed method for sensor fault diagnosis is efficient.

DSMC simulation of rarefied gas flows under cooling conditions using a new iterative wall heat flux specifying technique

NASA Astrophysics Data System (ADS)

Akhlaghi, H.; Roohi, E.; Myong, R. S.

2012-11-01

Micro/nano geometries with specified wall heat flux are widely encountered in electronic cooling and micro-/nano-fluidic sensors. We introduce a new technique to impose the desired (positive/negative) wall heat flux boundary condition in the DSMC simulations. This technique is based on an iterative progress on the wall temperature magnitude. It is found that the proposed iterative technique has a good numerical performance and could implement both positive and negative values of wall heat flux rates accurately. Using present technique, rarefied gas flow through micro-/nanochannels under specified wall heat flux conditions is simulated and unique behaviors are observed in case of channels with cooling walls. For example, contrary to the heating process, it is observed that cooling of micro/nanochannel walls would result in small variations in the density field. Upstream thermal creep effects in the cooling process decrease the velocity slip despite of the Knudsen number increase along the channel. Similarly, cooling process decreases the curvature of the pressure distribution below the linear incompressible distribution. Our results indicate that flow cooling increases the mass flow rate through the channel, and vice versa.

Functional micro/nanostructures: simple synthesis and application in sensors, fuel cells, and gene delivery.

PubMed

Guo, Shaojun; Wang, Erkang

2011-07-19

In order to develop new, high technology devices for a variety of applications, researchers would like to better control the structure and function of micro/nanomaterials through an understanding of the role of size, shape, architecture, composition, hybridization, molecular engineering, assembly, and microstructure. However, researchers continue to face great challenges in the construction of well-defined micro/nanomaterials with diverse morphologies. At the same time, the research interface where micro/nanomaterials meet electrochemistry, analytical chemistry, biomedicine, and other fields provides rich opportunities to reveal new chemical, physical, and biological properties of micro/nanomaterials and to uncover many new functions and applications of these materials. In this Account, we describe our recent progress in the construction of novel inorganic and polymer nanostructures formed through different simple strategies. Our synthetic strategies include wet-chemical and electrochemical methods for the controlled production of inorganic and polymer nanomaterials with well-defined morphologies. These methods are both facile and reliable, allowing us to produce high-quality micro/nanostructures, such as nanoplates, micro/nanoflowers, monodisperse micro/nanoparticles, nanowires, nanobelts, and polyhedron and even diverse hybrid structures. We implemented a series of approaches to address the challenges in the preparation of new functional micro/nanomaterials for a variety of important applications This Account also highlights new or enhanced applications of certain micro/nanomaterials in sensing applications. We singled out analytical techniques that take advantage of particular properties of micro/nanomaterials. Then by rationally tailoring experimental parameters, we readily and selectively obtained different types of micro/nanomaterials with novel morphologies with high performance in applications such as electrochemical sensors, electrochemiluminescent sensors, gene delivery agents, and fuel cell catalysts. We expect that micro/nanomaterials with unique structural characteristics, properties, and functions will attract increasing research interest and will lead to new opportunities in various fields of research.

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

PubMed Central

Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao

2010-01-01

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm2. The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C. PMID:22163459

Polypyrrole porous micro humidity sensor integrated with a ring oscillator circuit on chip.

PubMed

Yang, Ming-Zhi; Dai, Ching-Liang; Lu, De-Hao

2010-01-01

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a sensing capacitor and a sensing film. The sensing capacitor is constructed from spiral interdigital electrodes that can enhance the sensitivity of the sensor. The sensing film of the sensor is polypyrrole, which is prepared by the chemical polymerization method, and the film has a porous structure. The sensor needs a post-CMOS process to coat the sensing film. The post-CMOS process uses a wet etching to etch the sacrificial layers, and then the polypyrrole is coated on the sensing capacitor. The sensor generates a change in capacitance when the sensing film absorbs or desorbs vapor. The ring oscillator circuit converts the capacitance variation of the sensor into the oscillation frequency output. Experimental results show that the sensitivity of the humidity sensor is about 99 kHz/%RH at 25 °C.

An error-based micro-sensor capture system for real-time motion estimation

NASA Astrophysics Data System (ADS)

Yang, Lin; Ye, Shiwei; Wang, Zhibo; Huang, Zhipei; Wu, Jiankang; Kong, Yongmei; Zhang, Li

2017-10-01

A wearable micro-sensor motion capture system with 16 IMUs and an error-compensatory complementary filter algorithm for real-time motion estimation has been developed to acquire accurate 3D orientation and displacement in real life activities. In the proposed filter algorithm, the gyroscope bias error, orientation error and magnetic disturbance error are estimated and compensated, significantly reducing the orientation estimation error due to sensor noise and drift. Displacement estimation, especially for activities such as jumping, has been the challenge in micro-sensor motion capture. An adaptive gait phase detection algorithm has been developed to accommodate accurate displacement estimation in different types of activities. The performance of this system is benchmarked with respect to the results of VICON optical capture system. The experimental results have demonstrated effectiveness of the system in daily activities tracking, with estimation error 0.16 ± 0.06 m for normal walking and 0.13 ± 0.11 m for jumping motions. Research supported by the National Natural Science Foundation of China (Nos. 61431017, 81272166).

Selective and reversible ammonia gas detection with nanoporous film functionalized silicon photonic micro-ring resonator.

PubMed

Yebo, Nebiyu A; Sree, Sreeprasanth Pulinthanathu; Levrau, Elisabeth; Detavernier, Christophe; Hens, Zeger; Martens, Johan A; Baets, Roel

2012-05-21

Portable, low cost and real-time gas sensors have a considerable potential in various biomedical and industrial applications. For such applications, nano-photonic gas sensors based on standard silicon fabrication technology offer attractive opportunities. Deposition of high surface area nano-porous coatings on silicon photonic sensors is a means to achieve selective, highly sensitive and multiplexed gas detection on an optical chip. Here we demonstrate selective and reversible ammonia gas detection with functionalized silicon-on-insulator optical micro-ring resonators. The micro-ring resonators are coated with acidic nano-porous aluminosilicate films for specific ammonia sensing, which results in a reversible response to NH(3)with selectivity relative to CO(2). The ammonia detection limit is estimated at about 5 ppm. The detectors reach a steady response to NH(3) within 30 and return to their base level within 60 to 90 seconds. The work opens perspectives on development of nano-photonic sensors for real-time, non-invasive, low cost and light weight biomedical and industrial sensing applications.

An integrated microfluidic sensor for real-time detection of RNA in seawater using preserved reagents

NASA Astrophysics Data System (ADS)

Tsaloglou, M.-N.; Loukas, C. M.; Ruano-López, J. M.; Morgan, H.; Mowlem, M. C.

2012-04-01

Quantitation of RNA sequences coding either for key metabolic proteins or highly conserved ribosomal subunits can provide insight on cell abundance, speciation and viability. Nucleic sequence-based amplification (NASBA) is an isothermal alternative to traditional nucleic acid amplification methods, such as quantitative PCR. We present here an integrated microfluidic sensor for cell concentration and lysis, RNA extraction/purification and quantitative RNA detection for environmental applications. The portable system uses pre-loaded reagents, stored as a gel on a disposable microfluidic cartridge, which is manufactured using low-cost injection moulding. The NASBA reaction is monitored real-time using a bespoke control unit which includes: an external fluorescence detector, three peristaltic micro-pumps, two heaters and temperature sensors, a battery, seven pin actuated micro-motors (or valve actuators), and an automatic cartridge insertion mechanism. The system has USB connectivity and none of the expensive components require replacing between reactions. Long-term storage of reagents is critically important for any diagnostic tool that will be used in the field, whether for medical or environmental analysis and has not been previously demonstrated for NASBA reagents on-chip. We have shown effective amplification, for as little as 500 cells of the toxic microalga Karenia brevis using reagents which had been preserved as a gel for 45 days. This is the first reported real-time isothermal RNA amplification using with on-chip preservation. Annealing of primers, amplification at 41 °C and real-time fluorescence detection using, also for the first time, an internal control and sequence-specific molecular beacons was all performed on our microfluidic sensor. Our results show excellent promise as a future quantitative tool of in situ phytoplankton analysis and other environmental applications, where long-term reagent storage and low power consumption is essential.

Chalcogenide glass sensors for bio-molecule detection

NASA Astrophysics Data System (ADS)

Lucas, Pierre; Coleman, Garrett J.; Cantoni, Christopher; Jiang, Shibin; Luo, Tao; Bureau, Bruno; Boussard-Pledel, Catherine; Troles, Johann; Yang, Zhiyong

2017-02-01

Chalcogenide glasses constitute the only class of materials that remain fully amorphous while exhibiting broad optical transparency over the full infrared region from 2-20 microns. As such, they can be shaped into complex optical elements while retaining a clear optical window that encompass the vibrational signals of virtually any molecules. Chalcogenide glasses are therefore ideal materials for designing biological and chemical sensors based on vibrational spectroscopy. In this paper we review the properties of these glasses and the corresponding design of optical elements for bio-chemical sensing. Amorphous chalcogenides offer a very wide compositional landscape that permit to tune their physical properties to match specific demands for the production of optical devices. This includes tailoring the infrared window over specific ranges of wavelength such as the long-wave infrared region to capture important vibrational signal including the "signature region" of micro-organisms or the bending mode of CO2 molecules. Additionally, compositional engineering enables tuning the viscosity-temperature dependence of the glass melt in order to control the rheological properties that are fundamental to the production of glass elements. Indeed, exquisite control of the viscosity is key to the fabrication process of many optical elements such as fiber drawing, lens molding, surface embossing or reflow of microresonators. Optimal control of these properties then enables the design and fabrication of optimized infrared sensors such as Fiber Evanescent Wave Spectroscopy (FEWS) sensors, Whispering Gallery Modes (WGM) micro-resonator sensors, nanostructured surfaces for integrated optics and surface-enhanced processes, or lens molding for focused collection of infrared signals. Many of these sensor designs can be adapted to collect and monitor the vibrational signal of live microorganisms to study their metabolism in controlled environmental conditions. Further materials engineering enable the design of opto-electrophoretic sensors that permit simultaneous capture and detection of hazardous bio-molecules such as bacteria, virus and proteins using a conducting glass that serves as both an electrode and an optical elements. Upon adequate spectral analysis such as Principal Component Analysis (PCA) or Partial Least Square (PLS) regression these devices enable highly selective identification of hazardous microorganism such as different strains of bacteria and food pathogens.

Nano-Fabrication Methods for Micro-Miniature Optical Thermometers Suited to High Temperatures and Harsh Environments

NASA Astrophysics Data System (ADS)

DePew, K. A.; Ma, C.; Schiffbauer, J. D.; Wang, J.; Dong, B.; Lally, E.; Wang, A.

2012-12-01

The Center for Photonics Technology (CPT) at Virginia Tech is engaged in cutting edge research of fiber optic sensing technologies. One current research area is the design of fiber optic temperature sensors for harsh environments. Fiber optic temperature sensing offers significant advantages over electronic sensing in terms of size and insensitivity to harsh environmental conditions and electromagnetic interference. In the field, fiber optic thermometers have been used in recent snow cover studies as well as fluvial temperature profiling projects. The extended capabilities of CPT optical sensors open further possibilities for application in additional geologic realms requiring high temperature sensing in corrosive environments. Significant strides have been made in developing single-crystal sapphire based fiber optic sensing elements for high temperature environments which are otherwise difficult to instrument. Utilization of strain insensitive designs and optical sapphire materials allow for thermometers capable of operation above 1500°C with reduced sensitivity to chemical corrosion and mechanical interference. Current efforts in fabrication techniques are reducing the footprint of temperature sensors below the millimeter scale while maintaining high resolution and operating range. The FEI Helios 600 NanoLab workstation at the Virginia Tech Institute for Critical Technologies and Applied Science has been employed, providing the capabilities necessary to reduce the footprint of sensing elements to the dimensions of standard optical communication fiber using a Ga+ focused ion beam (FIB). The capability of semi-distributed multi-point sensing can also be accomplished at this scale using similar FIB milling techniques. The fiber optic thermometer designs resulting from these methods are compact, lightweight, and able to provide remote sensing without need for electrical power at the measurement point. These traits make them an ideal sensing platform for laboratory applications with minimal instrumentation egress as well as field deployment in areas where traditional electronic technologies cannot survive.

Real time monitoring of progressive damage during loading of a simplified total hip stem construct using embedded acoustic emission sensors.

PubMed

Mavrogordato, Mark; Taylor, Mark; Taylor, Andrew; Browne, Martin

2011-05-01

Acoustic emission (AE) is a non-destructive technique that is capable of passively monitoring failure of a construct with excellent temporal resolution. Previous investigations using AE to monitor the integrity of a total hip replacement (THR) have used surface mounted sensors; however, the AE signal attenuates as it travels through materials and across interfaces. This study proposes that directly embedded sensors within the femoral stem of the implant will reduce signal attenuation effects and eliminate potential complications and variability associated with fixing the sensor to the sample. Data was collected during in vitro testing of implanted constructs, and information from both embedded and externally mounted AE sensors was compared and corroborated by micro-Computed Tomography (micro-CT) images taken before and after testing. The results of this study indicate that the embedded sensors gave a closer corroboration to observed damage using micro-CT and were less affected by unwanted noise sources. This has significant implications for the use of AE in assessing the state of THR constructs in vitro and it is hypothesised that directly embedded AE sensors may provide the first steps towards an in vivo, cost effective, user friendly, non-destructive system capable of continuously monitoring the condition of the implanted construct. Copyright © 2010 IPEM. Published by Elsevier Ltd. All rights reserved.

Device for self-verifying temperature measurement and control

DOEpatents

Watkins, Arthur D.; Cannon, Collins P.; Tolle, Charles R.

2004-08-03

A measuring instrument includes a first temperature sensor, a second temperature sensor and circuitry. The first and second temperature sensors each generate a signal indicative of the temperature of a medium being detected. The circuitry is configured to activate verification of temperature being sensed with the first sensor. According to one construction, the first temperature sensor comprises at least one thermocouple temperature sensor and the second temperature sensor comprises an optical temperature sensor, each sensor measuring temperature over the same range of temperature, but using a different physical phenomena. Also according to one construction, the circuitry comprises a computer configured to detect failure of one of the thermocouples by comparing temperature of the optical temperature sensor with each of the thermocouple temperature sensors. Even further, an output control signal is generated via a fuzzy inference machine and control apparatus.

Device and method for self-verifying temperature measurement and control

DOEpatents

Watkins, Arthur D.; Cannon, Collins P.; Tolle, Charles R.

2002-10-29

A measuring instrument includes a first temperature sensor, a second temperature sensor and circuitry. The first and second temperature sensors each generate a signal indicative of the temperature of a medium being detected. The circuitry is configured to activate verification of temperature being sensed with the first sensor. According to one construction, the first temperature sensor comprises at least one thermocouple temperature sensor and the second temperature sensor comprises an optical temperature sensor, each sensor measuring temperature over the same range of temperature, but using a different physical phenomena. Also according to one construction, the circuitry comprises a computer configured to detect failure of one of the thermocouples by comparing temperature of the optical temperature sensor with each of the thermocouple temperature sensors. Even further, an output control signal is generated via a fuzzy inference machine and control apparatus.

Polymer encapsulated microcavity optomechanical magnetometer

DOE PAGES

Zhu, Jiangang; Zhao, Guangming; Savukov, Igor; ...

2017-08-21

We demonstrate a magnetometer using polymer encapsulated whispering-gallery-mode microcavity actuated by a micro-magnet. The magnetic field induces force on the micro-magnet causing deformation in the polymer around the microcavity. Subsequently the microcavity detects the change in the refractive index of the polymer resulted from the deformation. This magnetometer works in the frequency range of hertz-to-kilohertz range and achieves a sensitivity of 880 pT/Hz 1/2 at 200 Hz in a micro-scale sensor volume. Polymer encapsulation of the magnetometer and fiber optical connection ensures environmental robustness and practicality of the sensor.

Magnetic sensor technology based on giant magneto-impedance effect in amorphous wires

NASA Astrophysics Data System (ADS)

Wang, X.; Teng, Y.; Wang, C.; Li, Q.

2012-12-01

This project focuses on giant magneto-impedance (GMI) effect that found in the soft magnetic amorphous wires in recent years, when AC current through the amorphous wire, induced voltage in the wires would change sensitively with a small external magnetic field along the wire vertical imposed changes. GMI magnetic sensor could compensate for the shortcomings of the traditional magnetic sensors and detect weak magnetic field, meanwhile the characteristics of high stability, high sensitivity, high resolution, fast response and low power consumption, which makes it becoming the focus of extensive research at home and abroad and being new mode of the next age of the physical geography observation. The emphasis of the project is the research on the high sensitivity amorphous wire detector and the low noise capability circuit design. In this paper, it is analyzed the theory of the Amorphous Wire Giant-Magneto-Impedance (AWGMI) effect and its influence factors in details, and expatiated the sensor principle based on AWGMI. On the basis of AWGMI, the experimental system of the micro-magnetic sensor is designed, which is composed of the detecting signals, processing and collecting data, display and transmitting data circuit and corresponding functional software etc. The properties of this kind of micro-magnetic sensor are studied by experiments, such as its linearity, sensitivity, frequency response, noise, stability and temperature properties and so on, especially analyzed the relation of the drive signals with all kinds of characteristics. The results show that there is no direct relationship between the frequency of the drive signals and linear property of the sensor. But with the increase of its frequency, some fluctuation appears on the characteristic curves; the direct relation is found between the frequency of the drive signal and sensitivity, with the increase of the frequency, AWGMI effect increases monotonously. It leads to the amplitude of the output voltage increase with the change of the outer magnetic field and results in the increase of the sensor sensitivity; it can be enhanced the corresponding rate of the sensor to the low frequency magnetic field by increasing the drive signal frequency. By experiments, the best sensitivity and noise valves is 0.5225 mV/nT, 1.566nT respectively.

Integrated Navigation System Design for Micro Planetary Rovers: Comparison of Absolute Heading Estimation Algorithms and Nonlinear Filtering

PubMed Central

Ilyas, Muhammad; Hong, Beomjin; Cho, Kuk; Baeg, Seung-Ho; Park, Sangdeok

2016-01-01

This paper provides algorithms to fuse relative and absolute microelectromechanical systems (MEMS) navigation sensors, suitable for micro planetary rovers, to provide a more accurate estimation of navigation information, specifically, attitude and position. Planetary rovers have extremely slow speed (~1 cm/s) and lack conventional navigation sensors/systems, hence the general methods of terrestrial navigation may not be applicable to these applications. While relative attitude and position can be tracked in a way similar to those for ground robots, absolute navigation information is hard to achieve on a remote celestial body, like Moon or Mars, in contrast to terrestrial applications. In this study, two absolute attitude estimation algorithms were developed and compared for accuracy and robustness. The estimated absolute attitude was fused with the relative attitude sensors in a framework of nonlinear filters. The nonlinear Extended Kalman filter (EKF) and Unscented Kalman filter (UKF) were compared in pursuit of better accuracy and reliability in this nonlinear estimation problem, using only on-board low cost MEMS sensors. Experimental results confirmed the viability of the proposed algorithms and the sensor suite, for low cost and low weight micro planetary rovers. It is demonstrated that integrating the relative and absolute navigation MEMS sensors reduces the navigation errors to the desired level. PMID:27223293

Micro-Electromechanical Affinity Sensor for the Monitoring of Glucose in Bioprocess Media

PubMed Central

Theuer, Lorenz; Lehmann, Micha; Junne, Stefan; Neubauer, Peter; Birkholz, Mario

2017-01-01

An affinity-viscometry-based micro-sensor probe for continuous glucose monitoring was investigated with respect to its suitability for bioprocesses. The sensor operates with glucose and dextran competing as binding partner for concanavalin A, while the viscosity of the assay scales with glucose concentration. Changes in viscosity are determined with a micro-electromechanical system (MEMS) in the measurement cavity of the sensor probe. The study aimed to elucidate the interactions between the assay and a typical phosphate buffered bacterial cultivation medium. It turned out that contact with the medium resulted in a significant long-lasting drift of the assay’s viscosity at zero glucose concentration. Adding glucose to the medium lowers the drift by a factor of eight. The cglc values measured off-line with the glucose sensor for monitoring of a bacterial cultivation were similar to the measurements with an enzymatic assay with a difference of less than ±0.15 g·L−1. We propose that lectin agglomeration, the electro-viscous effect, and constitutional changes of concanavalin A due to exchanges of the incorporated metal ions may account for the observed viscosity increase. The study has demonstrated the potential of the MEMS sensor to determine sensitive viscosity changes within very small sample volumes, which could be of interest for various biotechnological applications. PMID:28594350

Integrated Navigation System Design for Micro Planetary Rovers: Comparison of Absolute Heading Estimation Algorithms and Nonlinear Filtering.

PubMed

Ilyas, Muhammad; Hong, Beomjin; Cho, Kuk; Baeg, Seung-Ho; Park, Sangdeok

2016-05-23

This paper provides algorithms to fuse relative and absolute microelectromechanical systems (MEMS) navigation sensors, suitable for micro planetary rovers, to provide a more accurate estimation of navigation information, specifically, attitude and position. Planetary rovers have extremely slow speed (~1 cm/s) and lack conventional navigation sensors/systems, hence the general methods of terrestrial navigation may not be applicable to these applications. While relative attitude and position can be tracked in a way similar to those for ground robots, absolute navigation information is hard to achieve on a remote celestial body, like Moon or Mars, in contrast to terrestrial applications. In this study, two absolute attitude estimation algorithms were developed and compared for accuracy and robustness. The estimated absolute attitude was fused with the relative attitude sensors in a framework of nonlinear filters. The nonlinear Extended Kalman filter (EKF) and Unscented Kalman filter (UKF) were compared in pursuit of better accuracy and reliability in this nonlinear estimation problem, using only on-board low cost MEMS sensors. Experimental results confirmed the viability of the proposed algorithms and the sensor suite, for low cost and low weight micro planetary rovers. It is demonstrated that integrating the relative and absolute navigation MEMS sensors reduces the navigation errors to the desired level.

Smart garments for emergency operators: the ProeTEX project.

PubMed

Curone, Davide; Secco, Emanuele Lindo; Tognetti, Alessandro; Loriga, Giannicola; Dudnik, Gabriela; Risatti, Michele; Whyte, Rhys; Bonfiglio, Annalisa; Magenes, Giovanni

2010-05-01

Financed by the European Commission, a consortium of 23 European partners, consisting of universities, research institutions, industries, and organizations operating in the field of emergency management, is developing a new generation of "smart" garments for emergency-disaster personnel. Garments integrate newly developed wearable and textile solutions, such as commercial portable sensors and devices, in order to continuously monitor risks endangering rescuers' lives. The system enables detection of health-state parameters of the users (heart rate, breathing rate, body temperature, blood oxygen saturation, position, activity, and posture) and environmental variables (external temperature, presence of toxic gases, and heat flux passing through the garments), to process data and remotely transmit useful information to the operation manager. The European-integrated project, called ProeTEX (Protection e-Textiles: Micro-Nano-Structured fiber systems for Emergency-Disaster Wear) started on February, 2006 and will end on July, 2010. During this 4.5 years period, three subsequent generations of sensorized garments are being released. This paper proposes an overview of the project and gives a description of the second-generation prototypes, delivered at the end of 2008.

Wheels With Sense

NASA Astrophysics Data System (ADS)

Cambridge, Dwayne; Clauss, Douglas; Hewson, Fraser; Brown, Robert; Hisrich, Robert; Taylor, Cyrus

2002-10-01

We describe a student intrapreneurial project in the Physics Entrepreneurship Program at Case Western Reserve University. At the request of a major fortune 100 company, a study has been made of the technical and marketing issues for a new business of selling sensors on commercial vehicle wheels for monitoring pressure, temperature, rotations, and vibrations, as well as providing identification. The nature of the physics involved in the choice of the appropriate device such as capacitive or piezoresistive sensors is discussed, along with the possibility of MEMS (micro-electro-mechanical systems) technology and RFID (radiofrequency identification) readout on wheels. Five options (status quo, in-house development, external business acquisition, a large business national partnership, and a small-business Cleveland consortium partnership) were studied from both technological and business perspectives to commercialize the technology. The decision making process for making a choice is explained.

14 GHz longitudinally detected electron spin resonance using microHall sensors

NASA Astrophysics Data System (ADS)

Bouterfas, M.; Mouaziz, S.; Popovic, R. S.

2017-09-01

In this work we developed a home-made LOngitudinally Detected Electron Spin Resonance (LODESR) spectrometer based on a microsize Hall sensor. A coplanar waveguide (CPW)-resonator is used to induce microwave-excitation on the sample at 14 GHz. We used InSb cross-shaped Hall devices with active areas of (10 μm × 10 μm) and (5 μm × 5 μm) . Signal intensities of the longitudinal magnetization component of DPPH and YIG samples of volumes about (10 μm) 3 and (5 μm) 3 , are measured under amplitude and frequency modulated microwave magnetic field generated by the CPW-resonator. At room temperature, 109spins /G √Hz sensitivity is achieved for 0.2mT linewidth, a result which is still better than most of inductive detected LODESR sensitivities.

Review of the potential of a wireless MEMS and TFT microsystems for the measurement of pressure in the GI tract.

PubMed

Arshak, A; Arshak, K; Waldron, D; Morris, D; Korostynska, O; Jafer, E; Lyons, G

2005-06-01

Telemetry capsules have existed since the 1950s and were used to measure temperature, pH or pressure inside the gastrointestinal (GI) tract. It was hoped that these capsules would replace invasive techniques in the diagnosis of function disorders in the GI tract. However, problems such as signal loss and uncertainty of the pills position limited their use in a clinical setting. In this paper, a review of the capabilities of MicroElectroMechanical Systems (MEMS) and thick film technology (TFT) for the fabrication of a wireless pressure sensing microsystem is presented. The circuit requirements and methods of data transfer are examined. The available fabrication methods for MEMS sensors are also discussed and examples of wireless sensors are given. Finally the limitations of each technology are examined.

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure.

PubMed

Wang, Yu-Hsiang; Lee, Chia-Yen; Chiang, Che-Ming

2007-10-17

This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 ω/ms -1 ), a high velocity measurement limit (45ms -1 ) and a rapid response time (0.53 s).

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements, volume II

DOT National Transportation Integrated Search

2016-08-01

This two-pronged study evaluated the performance of commercial off-the-shelf (COTS) micro-electromechanical sensors and systems (MEMS) embedded in concrete pavement (Final Report Volume I) and developed a wireless MEMS multifunctional sensor system f...

The Electrophysiological Biosensor for Batch-Measurement of Cell Signals

NASA Astrophysics Data System (ADS)

Suzuki, Kengo; Tanabe, Masato; Ezaki, Takahiro; Konishi, Satoshi; Oka, Hiroaki; Ozaki, Nobuhiko

This paper presents the development of electrophysiological biosensor. The developed sensor allows a batch-measurement by detecting all signals from a large number of cells together. The developed sensor employs the same measurement principle as the patch-clamp technique. A single cell is sucked and clamped in a micro hole with detecting electrode. Detecting electrodes in arrayed micro holes are connected together for the batch-measurement of signals a large number of cell signals. Furthermore, an array of sensors for batch-measurement is designed to improve measurement-throughput to satisfy requirements for the drug screening application.

Micro optical sensor systems for sunsensing applications

NASA Astrophysics Data System (ADS)

Leijtens, Johan; de Boom, Kees

2017-11-01

Optimum application of micro system technologies allows building small sensor systems that will alter procurement strategies for spacecraft manufacturers. One example is the decreased size and cost for state of the art sunsensors. Integrated sensor systems are being designed which, through use of microsystem technology, are an order of magnitutde smaller than most current sunsensors and which hold due to the large reproducibility through batch manufacturing the promise of drastic price reduction. If the Commercial Of The Shelf (COTS) approach is adopted by satellite manufacturers, this will drastically decrease mass and cost budgets associated with sunsensing applications.

From Micro to Nano: The Evolution of Wireless Sensor-Based Health Care.

PubMed

Sarkar, Subhadeep; Misra, Sudip

2016-01-01

Over the past decade, embedded systems and microelectromechanical systems have evolved in a radical way, redefining our standard of living and enhancing the quality of life. Health care, among various other fields, has benefited vastly from this technological development. The concept of using sensors for health care purposes originated in the late 1980s when sensors were developed to measure certain physiological parameters associated with the human body. In traditional sensor nodes, the signal sources are mostly different environmental phenomena (such as temperature, vibration, and luminosity) or man-made events (such as intrusion and mobile target tracking), whereas in case of the physiological sensors, the signal source is living human tissue. These sensor nodes, as their primary sensing element, have a diaphragm that converts pressure into displacement. This displacement, in turn, is subsequently transformed into an electrical signal. The concept of wireless physiological sensor nodes, however, gained popularity in the mid-2000s, with the sensed data from the nodes transmitted to the hub via a wireless medium. The network formed by this heterogeneous set of wireless body sensor nodes is termed a wireless body-area network (WBAN). Each WBAN is essentially a composition of multiple wireless body sensor nodes and a single hub. The hub is primarily responsible for acquisition of the raw sensed data from all the component sensor nodes and first-level aggregation of the data before transmitting the aggregated data for further analysis to a remote data acquisition center. Here, we outline the evolution of WBANs in the context of modern health care and its convergence with nanotechnology.

Development of Light Powered Sensor Networks for Thermal Comfort Measurement

PubMed Central

Lee, Dasheng

2008-01-01

Recent technological advances in wireless communications have enabled easy installation of sensor networks with air conditioning equipment control applications. However, the sensor node power supply, through either power lines or battery power, still presents obstacles to the distribution of the sensing systems. In this study, a novel sensor network, powered by the artificial light, was constructed to achieve wireless power transfer and wireless data communications for thermal comfort measurements. The sensing node integrates an IC-based temperature sensor, a radiation thermometer, a relative humidity sensor, a micro machined flow sensor and a microprocessor for predicting mean vote (PMV) calculation. The 935 MHz band RF module was employed for the wireless data communication with a specific protocol based on a special energy beacon enabled mode capable of achieving zero power consumption during the inactive periods of the nodes. A 5W spotlight, with a dual axis tilt platform, can power the distributed nodes over a distance of up to 5 meters. A special algorithm, the maximum entropy method, was developed to estimate the sensing quantity of climate parameters if the communication module did not receive any response from the distributed nodes within a certain time limit. The light-powered sensor networks were able to gather indoor comfort-sensing index levels in good agreement with the comfort-sensing vote (CSV) preferred by a human being and the experimental results within the environment suggested that the sensing system could be used in air conditioning systems to implement a comfort-optimal control strategy. PMID:27873877

Multiocular image sensor with on-chip beam-splitter and inner meta-micro-lens for single-main-lens stereo camera.

PubMed

Koyama, Shinzo; Onozawa, Kazutoshi; Tanaka, Keisuke; Saito, Shigeru; Kourkouss, Sahim Mohamed; Kato, Yoshihisa

2016-08-08

We developed multiocular 1/3-inch 2.75-μm-pixel-size 2.1M- pixel image sensors by co-design of both on-chip beam-splitter and 100-nm-width 800-nm-depth patterned inner meta-micro-lens for single-main-lens stereo camera systems. A camera with the multiocular image sensor can capture horizontally one-dimensional light filed by both the on-chip beam-splitter horizontally dividing ray according to incident angle, and the inner meta-micro-lens collecting the divided ray into pixel with small optical loss. Cross-talks between adjacent light field images of a fabricated binocular image sensor and of a quad-ocular image sensor are as low as 6% and 7% respectively. With the selection of two images from one-dimensional light filed images, a selective baseline for stereo vision is realized to view close objects with single-main-lens. In addition, by adding multiple light field images with different ratios, baseline distance can be tuned within an aperture of a main lens. We suggest the electrically selective or tunable baseline stereo vision to reduce 3D fatigue of viewers.

A Microseismometer for Terrestrial and Extraterrestrial Applications

NASA Technical Reports Server (NTRS)

Banerdt, W.; Kaiser, W.; Vanzandt, T.

1993-01-01

The scientific and technical requirements of extraterrestrial seismology place severe demands on instrumentation. Performance in terms of sensitivity, stability, and frequency band must match that of the best terrestrial instruments, at a fraction of the size, mass, and power. In addition, this performance must be realized without operator intervention in harsh temperature, shock, and radiation environments. These constraints have forced us to examine some fundamental limits of accelerometer design in order to produce a small, rugged, sensitive seismometer. Silicon micromachined sensor technology offers techniques for the fabrication of monolithic, robust, compact, low-power and -mass accelerometers. However, currently available sensors offer inadequate sensitivity and bandwidth. Our implementation of an advanced silicon micro machined seismometer is based on principles developed at JPL for high-sensitivity position sensor technology. The use of silicon micro machining technology with these new principles should enable the fabrication of a 10(exp -11) g sensitivity seismometer with a bandwidth of at least 0.01 to 20 Hz. The low Q properties of pure single-crystal silicon are essential in order to minimize the Brownian thermal noise limitations generally characteristic of seismometers with small proof masses. A seismometer consists of a spring-supported proof mass and a transducer for measuring its motion. For long period motion a position sensor is generally used, for which the displacement is proportional to the ground acceleration. The mechanical sensitivity can be increased either by increasing the proof mass or decreasing the spring stiffness, neither of which is desirable for planetary applications. Our approach has been to use an ultra sensitive capacitive position sensor with a sensitivity of better than 10(exp -13) m/Hz(exp 1/2). This allows the use of a stiffer suspension and a smaller proof mass. We have built several prototypes using these principles, and tests show that these devices can exhibit performance comparable to state-of-the-art instruments.

THE ADIABATIC DEMAGNETIZATION REFRIGERATOR FOR THE MICRO-X SOUNDING ROCKET TELESCOPE

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wikus, P.; Bagdasarova, Y.; Figueroa-Feliciano, E.

2010-04-09

The Micro-X Imaging X-ray Spectrometer is a sounding rocket payload slated for launch in 2011. An array of Transition Edge Sensors, which is operated at a bath temperature of 50 mK, will be used to obtain a high resolution spectrum of the Puppis-A supernova remnant. An Adiabatic Demagnetization Refrigerator (ADR) with a 75 gram Ferric Ammonium Alum (FAA) salt pill in the bore of a 4 T superconducting magnet provides a stable heat sink for the detector array only a few seconds after burnout of the rocket motors. This requires a cold stage design with very short thermal time constants.more » A suspension made from Kevlar strings holds the 255 gram cold stage in place. It is capable of withstanding loads in excess of 200 g. Stable operation of the TES array in proximity to the ADR magnet is ensured by a three-stage magnetic shielding system which consists of a superconducting can, a high-permeability shield and a bucking coil. The development and testing of the Micro-X payload is well underway.« less

The Enhancement Of UV Sensor Response By Zinc Oxide Nanorods / Reduced Graphene Oxide Bilayer Nanocomposites Film

NASA Astrophysics Data System (ADS)

Mohammed, Ali A. A.; Suriani, AB; Jabur, Akram R.

2018-05-01

Zinc oxide nanorods (ZnO NRs) / reduced graphene oxide (rGO) nanocomposites assisted by sodium dodecyl sulfate surfactant (ZnO NRs/rGO-SDS) showed a good response for UV sensor application that has sensitivity of around ∼32.54. Whereas, the UV sensor response on pristine ZnO NRs showed almost 15 times lower response than the ZnO NRs/rGO-SDS nanocomposites. The pristine ZnO NRs were prepared by sol-gel immersion method before rGO solution was sprayed on the ZnO films using spraying method. The GO solution was produced via electrochemical exfoliation method at 0.1 M SDS electrolyte then the solution was reduced using hydrazine hydrate under 24 hours magnetic stirring at a temperature of around ∼100 °C. The samples were characterized using energy dispersive X-ray, field emission scanning electron microscope, micro-Raman, ultraviolet visible, X-ray diffraction, UV lamp and four-point probe measurement. The aim of this study was to improve the UV sensor response based on ZnO/rGO-SDS nanocomposites. In conclusion, the fabricated ZnO NRs/rGO-SDS nanocomposites assisted with SDS is a good candidate for the use in UV sensor applications as compared to pristine ZnO NRs films.

Nanostructured conjugated polymers in chemical sensors: synthesis, properties and applications.

PubMed

Correa, D S; Medeiros, E S; Oliveira, J E; Paterno, L G; Mattoso, Luiz C

2014-09-01

Conjugated polymers are organic materials endowed with a π-electron conjugation along the polymer backbone that present appealing electrical and optical properties for technological applications. By using conjugated polymeric materials in the nanoscale, such properties can be further enhanced. In addition, the use of nanostructured materials makes possible miniaturize devices at the micro/nano scale. The applications of conjugated nanostructured polymers include sensors, actuators, flexible displays, discrete electronic devices, and smart fabric, to name a few. In particular, the use of conjugated polymers in chemical and biological sensors is made feasible owning to their sensitivity to the physicochemical conditions of its surrounding environment, such as chemical composition, pH, dielectric constant, humidity or even temperature. Subtle changes in these conditions bring about variations on the electrical (resistivity and capacitance), optical (absorptivity, luminescence, etc.), and mechanical properties of the conjugated polymer, which can be precisely measured by different experimental methods and ultimately associated with a specific analyte and its concentration. The present review article highlights the main features of conjugated polymers that make them suitable for chemical sensors. An especial emphasis is given to nanostructured sensors systems, which present high sensitivity and selectivity, and find application in beverage and food quality control, pharmaceutical industries, medical diagnosis, environmental monitoring, and homeland security, and other applications as discussed throughout this review.

Design and development of SiGe based near-infrared photodetectors

NASA Astrophysics Data System (ADS)

Zeller, John W.; Puri, Yash R.; Sood, Ashok K.; McMahon, Shane; Efsthadiatis, Harry; Haldar, Pradeep; Dhar, Nibir K.

2014-10-01

Near-infrared (NIR) sensors operating at room temperatures are critical for a variety of commercial and military applications including detecting mortar fire and muzzle flashes. SiGe technology offers a low-cost alternative to conventional IR sensor technologies such as InGaAs, InSb, and HgCdTe for developing NIR micro-sensors that will not require any cooling and can operate with high bandwidths and comparatively low dark currents. Since Ge has a larger thermal expansion coefficient than Si, tensile strain may be incorporated into detector devices during the growth process, enabling an extended operating wavelength range above 1600 nm. SiGe based pin photodetectors have advantages of high stability, low noise, and high responsivity compared to metal-semiconductor-metal (MSM) devices. We have developed a process flow and are fabricating SiGe detector devices on 12" (300 mm) silicon wafers in order to take advantage of high throughput, large-area leading-edge silicon based CMOS technology that provides small feature sizes with associated device cost/density scaling advantages. The fabrication of the detector devices is facilitated by a two-step growth process incorporating initial low temperature growth of Ge/SiGe to form a thin strain-relaxed layer, followed by high temperature growth to deposit a thicker absorbing film, and subsequent high temperature anneal. This growth process is designed to effectively reduce dark current and enhance detector performance by reducing the number of defects and threading dislocations which form recombination centers during the growth process. Various characterization techniques have been employed to determine the properties of the epitaxially deposited Ge/SiGe layers, and the corresponding results are discussed.

Giant magnetoresistive sensor

DOEpatents

Stearns, Daniel G.; Vernon, Stephen P.; Ceglio, Natale M.; Hawryluk, Andrew M.

1999-01-01

A magnetoresistive sensor element with a three-dimensional micro-architecture is capable of significantly improved sensitivity and highly localized measurement of magnetic fields. The sensor is formed of a multilayer film of alternately magnetic and nonmagnetic materials. The sensor is optimally operated in a current perpendicular to plane mode. The sensor is useful in magnetic read/write heads, for high density magnetic information storage and retrieval.

Design of PID temperature control system based on STM32

NASA Astrophysics Data System (ADS)

Zhang, Jianxin; Li, Hailin; Ma, Kai; Xue, Liang; Han, Bianhua; Dong, Yuemeng; Tan, Yue; Gu, Chengru

2018-03-01

A rapid and high-accuracy temperature control system was designed using proportional-integral-derivative (PID) control algorithm with STM32 as micro-controller unit (MCU). The temperature control system can be applied in the fields which have high requirements on the response speed and accuracy of temperature control. The temperature acquisition circuit in system adopted Pt1000 resistance thermometer as temperature sensor. Through this acquisition circuit, the monitoring actual temperature signal could be converted into voltage signal and transmitted into MCU. A TLP521-1 photoelectric coupler was matched with BD237 power transistor to drive the thermoelectric cooler (TEC) in FTA951 module. The effective electric power of TEC was controlled by the pulse width modulation (PWM) signals which generated by MCU. The PWM signal parameters could be adjusted timely by PID algorithm according to the difference between monitoring actual temperature and set temperature. The upper computer was used to input the set temperature and monitor the system running state via serial port. The application experiment results show that the temperature control system is featured by simple structure, rapid response speed, good stability and high temperature control accuracy with the error less than ±0.5°C.

Attractive mechanical properties of a lightweight highly sensitive bi layer thermistor: polycarbonate/organic molecular conductor

NASA Astrophysics Data System (ADS)

Laukhina, E.; Lebedev, V.; Rovira, C.; Laukhin, V.; Veciana, J.

2016-03-01

The paper covers some of the basic mechanical characteristics of a recently developed bi layer thermistor: polycarbonate/(001) oriented layer of organic molecular conductor α’-(BEDT-TTF)2IxBr3-x, were BEDT-TTF=bis(ethylenedithio)tetrathiafulvalen. The nano and macro mechanical properties have been studied in order to use this flexible, low cost thermistor in sensing applications by proper way. The nano-mechanical properties of the temperature sensitive semiconducting layer of α’-(BEDT-TTF)2IxBr3-x were tested using nanoindentation method. The value of Young's modulus in direction being perpendicular to the layer plan was found as 9.0 ±1.4 GPa. The macro mechanical properties of the thermistor were studied using a 5848 MicroTester. The tensile tests showed that basic mechanical characteristics of the thermistor are close to those of polycarbonate films. This indicates a good mechanical strength of the developed sensor. Therefore, the thermistor can be used in technologies that need to be instrumented with highly robustness lightweight low cost temperature sensors. The paper also reports synthetic details on fabricating temperature sensing e-textile. As the temperature control is becoming more and more important in biomedical technologies like healthcare monitoring, this work strongly contributes on the ongoing research on engineering sensitive conducting materials for biomedical applications.

An integrated micro-manipulation and biosensing platform built in glass-based LTPS TFT technology

NASA Astrophysics Data System (ADS)

Chen, Lei-Guang; Wu, Dong-Yi; S-C Lu, Michael

2012-09-01

The glass-based low-temperature polycrystalline-silicon (LTPS) thin-film transistor (TFT) process, widely known for making liquid crystal displays, is utilized in this work to realize a fully integrated, microbead-based micro-manipulation and biosensing platform. The operation utilizes arrays of microelectrodes made of transparent iridium tin oxide (ITO) to move the immobilized polystyrene microbeads to the sensor surface by dielectrophoresis (DEP). Detection of remaining microbeads after a specific antigen/antibody reaction is accomplished by photo-detectors under the transparent electrodes. It was found that microbeads can be driven successfully by the 30 × 30 µm2 microelectrodes separated by 10 µm with no more than 6 Vp-p, which is compatible with the operating range of thin-film transistors. Microbeads immobilized with antimouse immunoglobulin (IgG) and prostate-specific antigen (PSA) antibody were successfully detected after specific binding, illustrating the potential of LTPS TFT microarrays for more versatile biosensing applications.

One-Step Solvent Evaporation-Assisted 3D Printing of Piezoelectric PVDF Nanocomposite Structures.

PubMed

Bodkhe, Sampada; Turcot, Gabrielle; Gosselin, Frederick P; Therriault, Daniel

2017-06-21

Development of a 3D printable material system possessing inherent piezoelectric properties to fabricate integrable sensors in a single-step printing process without poling is of importance to the creation of a wide variety of smart structures. Here, we study the effect of addition of barium titanate nanoparticles in nucleating piezoelectric β-polymorph in 3D printable polyvinylidene fluoride (PVDF) and fabrication of the layer-by-layer and self-supporting piezoelectric structures on a micro- to millimeter scale by solvent evaporation-assisted 3D printing at room temperature. The nanocomposite formulation obtained after a comprehensive investigation of composition and processing techniques possesses a piezoelectric coefficient, d 31 , of 18 pC N -1 , which is comparable to that of typical poled and stretched commercial PVDF film sensors. A 3D contact sensor that generates up to 4 V upon gentle finger taps demonstrates the efficacy of the fabrication technique. Our one-step 3D printing of piezoelectric nanocomposites can form ready-to-use, complex-shaped, flexible, and lightweight piezoelectric devices. When combined with other 3D printable materials, they could serve as stand-alone or embedded sensors in aerospace, biomedicine, and robotic applications.

Fiber Laser methane sensor with the function of self-diagnose

NASA Astrophysics Data System (ADS)

Li, Yan-fang; Wei, Yu-bin; Shang, Ying; Wang, Chang; Liu, Tong-yu

2012-02-01

Using the technology of tunable diode laser absorption spectroscopy and the technology of micro-electronics, a fiber laser methane sensor based on the microprocessor C8051F410 is given. In this paper, we use the DFB Laser as the light source of the sensor. By tuning temperature and driver current of the DFB laser, we can scan the laser over the methane absorption line, Based on the Beer-Lambert law, through detect the variation of the light power before and after the absorption we realize the methane detection. It makes the real-time and online detection of methane concentration to be true, and it has the advantages just as high accuracy, immunity to other gases , long calibration cycle and so on. The sensor has the function of adaptive gain and self-diagnose. By introducing digital potentiometers, the gain of the photoelectric conversion operational amplifier can be controlled by the microprocessor according to the light power. When the gain and the conversion voltage achieve the set value, then we can consider the sensor in a fault status, and then the software will alarm us to check the status of the probe. So we improved the dependence and the stability of the measured results. At last we give some analysis on the sensor according the field application and according the present working, we have a look of our next work in the distance.

Hybrid plasmonic waveguide-assisted Metal–Insulator–Metal ring resonator for refractive index sensing

NASA Astrophysics Data System (ADS)

Butt, M. A.; Khonina, S. N.; Kazanskiy, N. L.

2018-05-01

A highly sensitive refractive index sensor based on an integrated hybrid plasmonic waveguide (HPWG) and a Metal-Insulator-Metal (M-I-M) micro-ring resonator is presented. In our design, there are two slot-waveguide-based micro-rings that encircle a gold disc. The outer slot WG is formed by the combination of Silicon-Air-Gold ring and the inner slot-waveguide is formed by Gold ring-Air-Gold disc. The slot-waveguide rings provide an interaction length sufficient to accumulate a detectable wavelength shift. The transmission spectrum and electric field distribution of this sensor structure are simulated using Finite Element Method (FEM). The sensitivity of this micro-ring resonator is achieved at 800 nm/RIU which is about six times higher than that of the conventional Si ring with the same geometry. Our proposed sensor design has a potential to find further applications in biomedical science and nano-photonic circuits.

The MITy micro-rover: Sensing, control, and operation

NASA Technical Reports Server (NTRS)

Malafeew, Eric; Kaliardos, William

1994-01-01

The sensory, control, and operation systems of the 'MITy' Mars micro-rover are discussed. It is shown that the customized sun tracker and laser rangefinder provide internal, autonomous dead reckoning and hazard detection in unstructured environments. The micro-rover consists of three articulated platforms with sensing, processing and payload subsystems connected by a dual spring suspension system. A reactive obstacle avoidance routine makes intelligent use of robot-centered laser information to maneuver through cluttered environments. The hazard sensors include a rangefinder, inclinometers, proximity sensors and collision sensors. A 486/66 laptop computer runs the graphical user interface and programming environment. A graphical window displays robot telemetry in real time and a small TV/VCR is used for real time supervisory control. Guidance, navigation, and control routines work in conjunction with the mapping and obstacle avoidance functions to provide heading and speed commands that maneuver the robot around obstacles and towards the target.

Vibration condition measure instrument of motor using MEMS accelerometer

NASA Astrophysics Data System (ADS)

Chen, Jun

2018-04-01

In this work, a novel vibration condition measure instrument of motor using a digital micro accelerometer is proposed. In order to reduce the random noise found in the data, the sensor modeling is established and also the Kalman filter (KMF) is developed. According to these data from KMF, the maximum vibration displacement is calculated by the integration algorithm with the DC bias removed. The high performance micro controller unit (MCU) is used in the implementation of controller. By the IIC digital interface port, the data are transmitted from sensor to controller. The hardware circuits of the sensor and micro controller are designed and tested. With the computational formula of maximum displacement and FFT, the high precession results of displacement and frequency are gotten. Finally, the paper presents various experimental results to prove that this instrument is suitable for application in electrical motor vibration measurement.

A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure

PubMed Central

Wang, Yu-Hsiang; Lee, Chia-Yen; Chiang, Che-Ming

2007-01-01

This paper presents a micro-scale air flow sensor based on a free-standing cantilever structure. In the fabrication process, MEMS techniques are used to deposit a silicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitride layer to form a piezoresistor, and the resulting structure is then etched to create a freestanding micro-cantilever. When an air flow passes over the surface of the cantilever beam, the beam deflects in the downward direction, resulting in a small variation in the resistance of the piezoelectric layer. The air flow velocity is determined by measuring the change in resistance using an external LCR meter. The experimental results indicate that the flow sensor has a high sensitivity (0.0284 Ω/ms-1), a high velocity measurement limit (45 ms-1) and a rapid response time (0.53 s). PMID:28903233

Development of Position-Sensitive Magnetic Calorimeters for X-Ray Astronomy

NASA Technical Reports Server (NTRS)

Bandler, SImon; Stevenson, Thomas; Hsieh, Wen-Ting

2011-01-01

Metallic magnetic calorimeters (MMC) are one of the most promising devices to provide very high energy resolution needed for future astronomical x-ray spectroscopy. MMC detectors can be built to large detector arrays having thousands of pixels. Position-sensitive magnetic (PoSM) microcalorimeters consist of multiple absorbers thermally coupled to one magnetic micro calorimeter. Each absorber element has a different thermal coupling to the MMC, resulting in a distribution of different pulse shapes and enabling position discrimination between the absorber elements. PoSMs therefore achieve the large focal plane area with fewer number of readout channels without compromising spatial sampling. Excellent performance of PoSMs was achieved by optimizing the designs of key parameters such as the thermal conductance among the absorbers, magnetic sensor, and heat sink, as well as the absorber heat capacities. Micro fab ri - cation techniques were developed to construct four-absorber PoSMs, in which each absorber consists of a two-layer composite of bismuth and gold. The energy resolution (FWHM full width at half maximum) was measured to be better than 5 eV at 6 keV x-rays for all four absorbers. Position determination was demonstrated with pulse-shape discrimination, as well as with pulse rise time. X-ray microcalorimeters are usually designed to thermalize as quickly as possible to avoid degradation in energy resolution from position dependence to the pulse shapes. Each pixel consists of an absorber and a temperature sensor, both decoupled from the cold bath through a weak thermal link. Each pixel requires a separate readout channel; for instance, with a SQUID (superconducting quantum interference device). For future astronomy missions where thousands to millions of resolution elements are required, having an individual SQUID readout channel for each pixel becomes difficult. One route to attaining these goals is a position-sensitive detector in which a large continuous or pixilated array of x-ray absorbers shares fewer numbers of temperature sensors. A means of discriminating the signals from different absorber positions, however, needs to be built into the device for each sensor. The design concept for the device is such that the shape of the temperature pulse with time depends on the location of the absorber. This inherent position sensitivity of the signal is then analyzed to determine the location of the event precisely, effectively yielding one device with many sub-pixels. With such devices, the total number of electronic channels required to read out a given number of pixels is significantly reduced. PoSMs were developed that consist of four discrete absorbers connected to a single magnetic sensor. The design concept can be extended to more than four absorbers per sensor. The thermal conductance between the sensor and each absorber is different by design and consequently, the pulse shapes are different depending upon which absorber the xrays are received, allowing position discrimination. A magnetic sensor was used in which a paramagnetic Au:Er temperature-sensitive material is located in a weak magnetic field. Deposition of energy from an x-ray photon causes an increase in temperature, which leads to a change of magnetization of the paramagnetic sensor, which is subsequently read out using a low noise dc-SQUID. The PoSM microcalorimeters are fully microfabricated: the Au:Er sensor is located above the meander, with a thin insulation gap in between. For this position-sensitive device, four electroplated absorbers are thermally linked to the sensor via heat links of different thermal conductance. One pixel is identical to that of a single-pixel design, consisting of an overhanging absorber fabricated directly on top of the sensor. It is therefore very strongly thermally coupled to it. The three other absorbers are supported directly on a silicon-nitride membrane. These absorbers are thermally coupled to the sensor via Ti (5 nm)/Au250 nm) metal links. The strength of the links is parameterized by the number of gold squares making up the link. For detector performance, experimentally different pulse-shapes were demonstrated with 6 keV x-rays, which clearly show different rise times for different absorber positions. For energy resolution measurement, the PoSM was operated at 32 mK with an applied field that was generated using a persistent current of 50 mA. Over the four pixels, energy resolution ranges from 4.4 to 4.7 eV were demonstrated.

Polymer microfiber bridging Bi-tapered refractive index sensor based on evanescent field

NASA Astrophysics Data System (ADS)

Lv, Ri-Qing; Wang, Qi; Wang, Bo-Tao; Liu, Yu; Kong, Lingxin

2018-05-01

A PDMS/graphene enhanced PMMA micro optical waveguide sensor is reported in terms of fabrication method and optical characteristics. The micro optical waveguide with a diameter of 6 μm and a length of 800 μm is used as the sensing probe to realize refractive index (RI) measurement suspended in NaCl solutions with different concentrations. Experimental results show that the refractive index sensing sensitivity can reach 2027.97 nm/RIU within the refractive index ranging from 1.3333-1.3426. Research results show that PMMA/graphene micro optical waveguide doped with PDMS is an excellent high sensitive sensing technology in refractive index detection field.

Study on micro-bend light transmission performance of novel liquid-core optical fiber

NASA Astrophysics Data System (ADS)

Ma, Junyan; Zhao, Zhimin; Wang, Kaisheng; Guo, Linfeng

2007-01-01

With the increasing development of material technology and electronic integration technology, optical fiber and its using in smart structure have become hot in the field of material research. And liquid-core optical fiber is a special kind of optical fiber, which is made using liquid material as core and polymer material as optical layer and protective covering, and it has the characteristics of large core diameter, high numerical aperture, large-scope and efficient spectrum transmission and long life for using. So the liquid-core optical fiber is very suitable for spectrum cure, ultraviolet solidification, fluorescence detection, criminal investigation and evidence obtainment, etc, and especially as light transfer element in some new structures for the measurement of some signals, such as concentration, voltage, temperature, light intensity and so on. In this paper, the novel liquid-core optical fiber is self-made, and then through the test of its light transmission performance in free state, the relation between axial micro-bend and light-intensity loss are presented. When the liquid-core optical fiber is micro-bent axially, along with the axial displacement's increase, output power of light is reducing increasingly, and approximately has linear relation to micro-displacement in a range. According to the results liquid-core fiber-optic micro-bend sensor can be designed to measure micro-displacement of the tested objects. Experimental data and analysis provide experimental basis for further application of liquid-core optical fiber.

Synthesis, characterization and application of functional carbon nano materials

NASA Astrophysics Data System (ADS)

Chu, Jin

The synthesis, characterizations and applications of carbon nanomaterials, including carbon nanorods, carbon nanosheets, carbon nanohoneycombs and carbon nanotubes were demonstrated. Different growth techniques such as pulsed laser deposition, DC/RF sputtering, hot filament physical vapour deposition, evaporative casting and vacuum filtration methods were introduced or applied for synthesizing carbon nanomaterials. The morphology, chemical compositions, bond structures, electronic, mechanical and sensing properties of the obtained samples were investigated. Tilted well-aligned carbon micro- and nano- hybrid rods were fabricated on Si at different substrate temperatures and incident angles of carbon source beam using the hot filament physical vapour deposition technique. The morphologic surfaces and bond structures of the oblique carbon rod-like structures were investigated by scanning electron microscopy, field emission scanning electron microscopy, transmission electron diffraction and Raman scattering spectroscopy. The field emission behaviour of the fabricated samples was also tested. Carbon nanosheets and nanohoneycombs were also synthesized on Si substrates using a hot filament physical vapor deposition technique under methane ambient and vacuum, respectively. The four-point Au electrodes are then sputtered on the surface of the nanostructured carbon films to form prototypical humidity sensors. The sensing properties of prototypical sensors at different temperature, humidity, direct current, and alternative current voltage were characterized. Linear sensing response of sensors to relative humidity ranging from 11% to 95% is observed at room temperature. Experimental data indicate that the carbon nanosheets based sensors exhibit an excellent reversible behavior and long-term stability. It also has higher response than that of the humidity sensor with carbon nanohoneycombs materials. Conducting composite films containing carbon nanotubes (CNTs) were prepared in two different ways of evaporative casting and vacuum filtration methods using the biopolymer kappa-carrageenan (KC) as a dispersant. Evaporative casting and vacuum filtration film-formation processes were compared by testing electrical properties. Results showed that films produced using vacuum filtration had higher electrical properties than those prepared using the evaporative casting method. The evaporative casted multi walled carbon nanotubes composite films also performed as the best humidity sensor over all other films measured.

A Self-Powered and Autonomous Fringing Field Capacitive Sensor Integrated into a Micro Sprinkler Spinner to Measure Soil Water Content.

PubMed

da Costa, Eduardo Ferreira; de Oliveira, Nestor E; Morais, Flávio J O; Carvalhaes-Dias, Pedro; Duarte, Luis Fernando C; Cabot, Andreu; Siqueira Dias, J A

2017-03-12

We present here the design and fabrication of a self-powered and autonomous fringing field capacitive sensor to measure soil water content. The sensor is manufactured using a conventional printed circuit board and includes a porous ceramic. To read the sensor, we use a circuit that includes a 10 kHz triangle wave generator, an AC amplifier, a precision rectifier and a microcontroller. In terms of performance, the sensor's capacitance (measured in a laboratory prototype) increases up to 5% when the volumetric water content of the porous ceramic changed from 3% to 36%, resulting in a sensitivity of S = 15.5 pF per unity change. Repeatability tests for capacitance measurement showed that the θ v sensor's root mean square error is 0.13%. The average current consumption of the system (sensor and signal conditioning circuit) is less than 1.5 μ A, which demonstrates its suitability for being powered by energy harvesting systems. We developed a complete irrigation control system that integrates the sensor, an energy harvesting module composed of a microgenerator installed on the top of a micro sprinkler spinner, and a DC/DC converter circuit that charges a 1 F supercapacitor. The energy harvesting module operates only when the micro sprinkler spinner is irrigating the soil, and the supercapacitor is fully charged to 5 V in about 3 h during the first irrigation. After the first irrigation, with the supercap fully charged, the system can operate powered only by the supercapacitor for approximately 23 days, without any energy being harvested.

Investigation of Very Fast Light Detectors: Silicon Photomultiplier and Micro PMT for a Cosmic Ray Array

NASA Astrophysics Data System (ADS)

Cervantes, Omar; Reyes, Liliana; Hooks, Tyler; Perez, Luis; Ritt, Stefan

2016-03-01

To construct a cosmic detector array using 4 scintillation detectors, we investigated 2 recent light sensor technologies from Hamamatsu, as possible readout detectors. First, we investigated several homemade versions of the multipixel photon counter (MPPC) light sensors. These detectors were either biased with internal or external high voltage power supplies. We made extensive measurements to confirm for the coincidence of the MPPC devices. Each sensor is coupled to a wavelength shifting fiber (WSF) that is embedded along a plastic scintillator sheet (30cmx60cmx1/4''). Using energetic cosmic rays, we evaluated several of these homemade detector modules placed above one another in a light proof enclosure. Next, we assembled 2 miniaturized micro photomultiplier (micro PMT), a device recently marketed by Hamamatsu. These sensors showed very fast response times. With 3 WSF embedded in scintillator sheets, we performed coincidence experiments. The detector waveforms were captured using the 5GS/sec domino ring sampler, the DRS4 and our workflow using the CERN PAW package and data analysis results would be presented. Title V Grant.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Menges, F.; Spieser, M.; Riel, H.

The thermal radiative near field transport between vanadium dioxide and silicon oxide at submicron distances is expected to exhibit a strong dependence on the state of vanadium dioxide which undergoes a metal-insulator transition near room temperature. We report the measurement of near field thermal transport between a heated silicon oxide micro-sphere and a vanadium dioxide thin film on a titanium oxide (rutile) substrate. The temperatures of the 15 nm vanadium dioxide thin film varied to be below and above the metal-insulator-transition, and the sphere temperatures were varied in a range between 100 and 200 °C. The measurements were performed using a vacuum-basedmore » scanning thermal microscope with a cantilevered resistive thermal sensor. We observe a thermal conductivity per unit area between the sphere and the film with a distance dependence following a power law trend and a conductance contrast larger than 2 for the two different phase states of the film.« less

Uniform manganese hexacyanoferrate hydrate nanocubes featuring superior performance for low-cost supercapacitors and nonenzymatic electrochemical sensors.

PubMed

Pang, Huan; Zhang, Yizhou; Cheng, Tao; Lai, Wen-Yong; Huang, Wei

2015-10-14

Uniform manganese hexacyanoferrate hydrate nanocubes are prepared via a simple chemical precipitation method at room temperature. Due to both micro/mesopores of the Prussian blue analogue and nanocubic structures, the manganese hexacyanoferrate hydrate nanocubes allow the efficient charge transfer and mass transport for electrolyte solution and chemical species. Thus, the manganese hexacyanoferrate hydrate nanocube electrode shows a good rate capability and cycling stability for electrochemical capacitors. Furthermore, electrodes modified with manganese hexacyanoferrate hydrate nanocubes demonstrate a sensitive electrochemical response to hydrogen peroxide (H2O2) in buffer solutions with a high selectivity.

MEMS Technology for Space Applications

NASA Technical Reports Server (NTRS)

vandenBerg, A.; Spiering, V. L.; Lammerink, T. S. J.; Elwenspoek, M.; Bergveld, P.

1995-01-01

Micro-technology enables the manufacturing of all kinds of components for miniature systems or micro-systems, such as sensors, pumps, valves, and channels. The integration of these components into a micro-electro-mechanical system (MEMS) drastically decreases the total system volume and mass. These properties, combined with the increasing need for monitoring and control of small flows in (bio)chemical experiments, makes MEMS attractive for space applications. The level of integration and applied technology depends on the product demands and the market. The ultimate integration is process integration, which results in a one-chip system. An example of process integration is a dosing system of pump, flow sensor, micromixer, and hybrid feedback electronics to regulate the flow. However, for many applications, a hybrid integration of components is sufficient and offers the advantages of design flexibility and even the exchange of components in the case of a modular set up. Currently, we are working on hybrid integration of all kinds of sensors (physical and chemical) and flow system modules towards a modular system; the micro total analysis system (micro TAS). The substrate contains electrical connections as in a printed circuit board (PCB) as well as fluid channels for a circuit channel board (CCB) which, when integrated, form a mixed circuit board (MCB).

Non-invasive characterization and quality assurance of silicon micro-strip detectors using pulsed infrared laser

NASA Astrophysics Data System (ADS)

Ghosh, P.

2016-01-01

The Compressed Baryonic Matter (CBM) experiment at FAIR is composed of 8 tracking stations consisting of roughly 1300 double sided silicon micro-strip detectors of 3 different dimensions. For the quality assurance of prototype micro-strip detectors a non-invasive detector charaterization is developed. The test system is using a pulsed infrared laser for charge injection and characterization, called Laser Test System (LTS). The system is aimed to develop a set of characterization procedures which are non-invasive (non-destructive) in nature and could be used for quality assurances of several silicon micro-strip detectors in an efficient, reliable and reproducible way. The procedures developed (as reported here) uses the LTS to scan sensors with a pulsed infra-red laser driven by step motor to determine the charge sharing in-between strips and to measure qualitative uniformity of the sensor response over the whole active area. The prototype detector modules which are tested with the LTS so far have 1024 strips with a pitch of 58 μm on each side. They are read-out using a self-triggering prototype read-out electronic ASIC called n-XYTER. The LTS is designed to measure sensor response in an automatized procedure at several thousand positions across the sensor with focused infra-red laser light (spot size ≈ 12 μm, wavelength = 1060 nm). The pulse with a duration of ≈ 10 ns and power ≈ 5 mW of the laser pulse is selected such, that the absorption of the laser light in the 300 μm thick silicon sensor produces ≈ 24000 electrons, which is similar to the charge created by minimum ionizing particles (MIP) in these sensors. The laser scans different prototype sensors and various non-invasive techniques to determine characteristics of the detector modules for the quality assurance is reported.

Distributed Autonomous Control Action Based on Sensor and Mission Fusion

DTIC Science & Technology

2005-09-01

programmable control algorithm driven by the readings of two pressure switch sensors located on either side of the valve unit. Thus, a micro-controller...and Characterization The process of leak detection and characterization must be accomplished with a set of pressure switch sensors. This sensor...economically supplementing existing widely used pressure switch type sensors which are characterized by prohibitively long inertial lag responses

Micro- and nano-NDE systems for aircraft: great things in small packages

NASA Astrophysics Data System (ADS)

Malas, James C.; Kropas-Hughes, Claudia V.; Blackshire, James L.; Moran, Thomas; Peeler, Deborah; Frazier, W. G.; Parker, Danny

2003-07-01

Recent advancements in small, microscopic NDE sensor technologies will revolutionize how aircraft maintenance is done, and will significantly improve the reliability and airworthiness of current and future aircraft systems. A variety of micro/nano systems and concepts are being developed that will enable whole new capabilities for detecting and tracking structural integrity damage. For aging aircraft systems, the impact of micro-NDE sensor technologies will be felt immediately, with dramatic reductions in labor for maintenance, and extended useable life of critical components being two of the primary benefits. For the fleet management of future aircraft systems, a comprehensive evaluation and tracking of vehicle health throughout its entire life cycle will be needed. Indeed, micro/nano NDE systems will be instrumental in realizing this futuristic vision. Several major challenges will need to be addressed, however, before micro- and nano-NDE systems can effectively be implemented, and this will require interdisciplinary research approaches, and a systematic engineering integration of the new technologies into real systems. Future research will need to emphasize systems engineering approaches for designing materials and structures with in-situ inspection and prognostic capabilities. Recent advances in 1) embedded / add-on micro-sensors, 2) computer modeling of nondestructive evaluation responses, and 3) wireless communications are important steps toward this goal, and will ultimately provide previously unimagined opportunities for realizing whole new integrated vehicle health monitoring capabilities. The future use of micro/nano NDE technologies as vehicle health monitoring tools will have profound implications, and will provide a revolutionary way of doing NDE in the near and distant future.

An integrated optic ethanol vapor sensor based on a silicon-on-insulator microring resonator coated with a porous ZnO film.

PubMed

Yebo, Nebiyu A; Lommens, Petra; Hens, Zeger; Baets, Roel

2010-05-24

Optical structures fabricated on silicon-on-insulator technology provide a convenient platform for the implementation of highly compact, versatile and low cost devices. In this work, we demonstrate the promise of this technology for integrated low power and low cost optical gas sensing. A room temperature ethanol vapor sensor is demonstrated using a ZnO nanoparticle film as a coating on an SOI micro-ring resonator of 5 microm in radius. The local coating on the ring resonators is prepared from colloidal suspensions of ZnO nanoparticles of around 3 nm diameter. The porous nature of the coating provides a large surface area for gas adsorption. The ZnO refractive index change upon vapor adsorption shifts the microring resonance through evanescent field interaction. Ethanol vapor concentrations down to 100 ppm are detected with this sensing configuration and a detection limit below 25 ppm is estimated.

Propulsion Instruments for Small Hall Thruster Integration

NASA Technical Reports Server (NTRS)

Johnson, Lee K.; Conroy, David G.; Spanjers, Greg G.; Bromaghim, Daron R.

2001-01-01

Planning and development are underway for the propulsion instrumentation necessary for the next AFRL electric propulsion flight project, which includes both a small Hall thruster and a micro-PPT. These instruments characterize the environment induced by the thruster and the associated data constitute part of a 'user's manual' for these thrusters. Several instruments probe the back-flow region of the thruster plume, and the data are intended for comparison with detailed numerical models in this region. Specifically, an ion probe is under development to determine the energy and species distributions, and a Langmuir probe will be employed to characterize the electron density and temperature. Other instruments directly measure the effects of thruster operation on spacecraft thermal control surfaces, optical surfaces, and solar arrays. Specifically, radiometric, photometric, and solar-cell-based sensors are under development. Prototype test data for most sensors should be available, together with details of the instrumentation subsystem and spacecraft interface.

A 0.18 μm CMOS LDO Regulator for an On-Chip Sensor Array Impedance Measurement System.

PubMed

Pérez-Bailón, Jorge; Márquez, Alejandro; Calvo, Belén; Medrano, Nicolás

2018-05-02

This paper presents a fully integrated 0.18 μm CMOS Low-Dropout (LDO) Voltage Regulator specifically designed to meet the stringent requirements of a battery-operated impedance spectrometry multichannel CMOS micro-instrument. The proposed LDO provides a regulated 1.8 V voltage from a 3.6 V to 1.94 V battery voltage over a −40 °C to 100 °C temperature range, with a compact topology (<0.10 mm² area) and a constant quiescent current of only 7.45 μA with 99.985% current efficiency, achieving remarkable state-of-art Figures of Merit (FoMs) for the regulating⁻transient performance. Experimental measurements validate its suitability for the target application, paving the way towards the future achievement of a truly portable System on Chip (SoC) platform for impedance sensors.

A MEMS-based super fast dew point hygrometer—construction and medical applications

NASA Astrophysics Data System (ADS)

Jachowicz, Ryszard S.; Weremczuk, Jerzy; Paczesny, Daniel; Tarapata, Grzegorz

2009-12-01

The paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between -10 °C and 40 °C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.

Gold nanowire assembling architecture for H2O2 electrochemical sensor.

PubMed

Guo, Shaojun; Wen, Dan; Dong, Shaojun; Wang, Erkang

2009-02-15

Morphological control of nanomaterials is of great interest due to their size and shape-dependent chemical and physical properties and very important applications in many fields such as biomedicine, sensors, electronics and others. In this paper, we reported a simple strategy for synthesizing gold nanowire assembling architecture at room temperature. It is found that two important factors, the proper volume ratio of ethanol to water and poly(vinyl pyrrolidone) (PVP), will play important roles in synthesizing flower-like short gold nanowire assembling spheres. Furthermore, the obtained flower-like gold assembling spheres with high surface-to-volume ratio have been employed as enhancing materials for electrochemical sensing H(2)O(2). The present electrochemical sensing platform exhibited good electrocatalytic activity towards the reduction of H(2)O(2). The detection limit for H(2)O(2) was found to be 1.2 microM, which was lower than certain enzyme-based biosensors.

Portable fiber-coupled diode-laser-based sensor for multiple trace gas detection

NASA Technical Reports Server (NTRS)

Lancaster, D. G.; Richter, D.; Tittel, F. K.

1999-01-01

Tunable narrowband mid-infrared radiation from 3.25 to 4.4 micrometers is generated by a compact fiber-coupled, difference-frequency-based spectroscopic source. A 20-mW external cavity diode laser (with a tuning range from 814 to 870 nm) and a 50-mW distributed-Bragg-reflector diode-laser-seeded ytterbium-doped fiber amplifier operating at 1083 nm are difference-frequency mixed in a multi-grating, temperature-controlled periodically poled LiNbO3 crystal. A conversion efficiency of 0.44 mW/(W2cm) (corresponding to a power of approximately equal to 3 microW at 3.3 micrometers) represents the highest conversion efficiency reported for a portable device. Performance characteristics of such a sensor and its application to spectroscopic detection of CO2, N2O, H2CO, HCl, NO2, and CH4 will be reported in this work.

Nafion/lead nitroprusside nanoparticles modified carbon ceramic electrode as a novel amperometric sensor for L-cysteine.

PubMed

Razmi, H; Heidari, H

2009-05-01

This work describes the electrochemical and electrocatalytic properties of carbon ceramic electrode (CCE) modified with lead nitroprusside (PbNP) nanoparticles as a new electrocatalyst material. The structure of deposited film on the CCE was characterized by energy dispersive X-ray (EDX), Fourier transform infrared (FTIR), and scanning electron microscopy (SEM). The cyclic voltammogram (CV) of the PbNP modified CCE showed two well-defined redox couples due to [Fe(CN)5NO](3-)/[Fe(CN)5NO](2-) and Pb(IV)/Pb(II) redox reactions. The modified electrode showed electrocatalytic activity toward the oxidation of L-cysteine and was used as an amperometric sensor. Also, to reduce the fouling effect of L-cysteine and its oxidation products on the modified electrode, a thin film of Nafion was coated on the electrode surface. The sensor response was linearly changed with L-cysteine concentration in the range of 1 x 10(-6) to 6.72 x 10(-5)mol L(-1) with a detection limit (signal/noise ratio [S/N]=3) of 0.46 microM. The sensor sensitivity was 0.17 microA (microM)(-1), and some important advantages such as simple preparation, fast response, good stability, interference-free signals, antifouling properties, and reproducibility of the sensor for amperometric determination of L-cysteine were achieved.

High-efficiency integrated piezoelectric energy harvesting systems

NASA Astrophysics Data System (ADS)

Hande, Abhiman; Shah, Pradeep

2010-04-01

This paper describes hierarchically architectured development of an energy harvesting (EH) system that consists of micro and/or macro-scale harvesters matched to multiple components of remote wireless sensor and communication nodes. The micro-scale harvesters consist of thin-film MEMS piezoelectric cantilever arrays and power generation modules in IC-like form to allow efficient EH from vibrations. The design uses new high conversion efficiency thin-film processes combined with novel cantilever structures tuned to multiple resonant frequencies as broadband arrays. The macro-scale harvesters are used to power the collector nodes that have higher power specifications. These bulk harvesters can be integrated with efficient adaptive power management circuits that match transducer impedance and maximize power harvested from multiple scavenging sources with very low intrinsic power consumption. Texas MicroPower, Inc. is developing process based on a composition that has the highest reported energy density as compared to other commercially available bulk PZT-based sensor/actuator ceramic materials and extending it to thin-film materials and miniature conversion transducer structures. The multiform factor harvesters can be deployed for several military and commercial applications such as underground unattended sensors, sensors in oil rigs, structural health monitoring, supply chain management, and battlefield applications such as sensors on soldier apparel, equipment, and wearable electronics.

Micro-reactors for characterization of nanostructure-based sensors.

PubMed

Savu, R; Silveira, J V; Flacker, A; Vaz, A R; Joanni, E; Pinto, A C; Gobbi, A L; Santos, T E A; Rotondaro, A L P; Moshkalev, S A

2012-05-01

Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO(2) substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10(-5) and 10(-1) mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.

Micro-reactors for characterization of nanostructure-based sensors

NASA Astrophysics Data System (ADS)

Savu, R.; Silveira, J. V.; Flacker, A.; Vaz, A. R.; Joanni, E.; Pinto, A. C.; Gobbi, A. L.; Santos, T. E. A.; Rotondaro, A. L. P.; Moshkalev, S. A.

2012-05-01

Fabrication and testing of micro-reactors for the characterization of nanosensors is presented in this work. The reactors have a small volume (100 μl) and are equipped with gas input/output channels. They were machined from a single piece of kovar in order to avoid leaks in the system due to additional welding. The contact pins were electrically insulated from the body of the reactor using a borosilicate sealing glass and the reactor was hermetically sealed using a lid and an elastomeric o-ring. One of the advantages of the reactor lies in its simple assembly and ease of use with any vacuum/gas system, allowing the connection of more than one device. Moreover, the lid can be modified in order to fit a window for in situ optical characterization. In order to prove its versatility, carbon nanotube-based sensors were tested using this micro-reactor. The devices were fabricated by depositing carbon nanotubes over 1 μm thick gold electrodes patterned onto Si/SiO2 substrates. The sensors were tested using oxygen and nitrogen atmospheres, in the pressure range between 10-5 and 10-1 mbar. The small chamber volume allowed the measurement of fast sensor characteristic times, with the sensors showing good sensitivity towards gas and pressure as well as high reproducibility.

Numerical studies of temperature effect on the extrusion fracture and swell of plastic micro-pipe

NASA Astrophysics Data System (ADS)

Ren, Zhong; Huang, Xingyuan; Xiong, Zhihua

2018-03-01

Temperature is a key factor that impacts extrusion forming quality of plastic micro-pipe. In this study, the effect of temperature on extrusion fracture and swell of plastic micro-pipe was investigated by numerical method. Under a certain of the melt’s flow volume, the extrusion pattern, extrusion swelling ratio of melt are obtained under different temperatures. Results show that the extrusion swelling ratio of plastic micro-pipe decreases with increasing of temperature. In order to study the reason of temperature effect, the physical distributions of plastic micro-pipe are gotten. Numerical results show that the viscosity, pressure, stress value of melt are all decreased with the increasing of temperature, which leads to decrease the extrusion swell and fracture phenomenon for the plastic micro-pipe.

Micro-thermal analysis of polyester coatings

NASA Astrophysics Data System (ADS)

Fischer, Hartmut R.

2010-04-01

The application and suitability of micro-thermal analysis to detect changes in the chemical and physical properties of coating due to ageing and especially photo-degradation is demonstrated using a model polyester coating based on neopentyl glycol isophthalic acid. The changes in chemical structure like chain scission and cross-linking are manifested by a shift of the LTA detectable Tg and by a change of the slope of the part of the LTA graph responsible for the penetration of the hot sensor into the material after passing the glass transition temperature. As such LTA is a valuable tool to have a quick look into coating surfaces and especially their ageing. The photo-degradation of polyester in air leads to the formation of a cross-linked network at a surface layer of about 3-4 μm coupled with an increase in hardness and of the glass transition temperature by ˜90 K, the effect is less drastic for a photo-degradation in a nitrogen environment. Moreover, the presence of a non-equilibrium dense surface layer with a higher Tg formed during the drying of the coating formulation and the film solidification can be shown.

Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors

PubMed Central

Thuau, Damien; Abbas, Mamatimin; Wantz, Guillaume; Hirsch, Lionel; Dufour, Isabelle; Ayela, Cédric

2016-01-01

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sensor with a cutting-edge electro-mechanical transducer based on an active organic field effect transistor (OFET) has been demonstrated. Using poly(vinylidenefluoride/trifluoroethylene) (P(VDF-TrFE)) piezoelectric polymer as active gate dielectric in the transistor mounted on a polymeric micro-cantilever, unique electro-mechanical properties were observed. Such an advanced scheme enables highly efficient integrated electro-mechanical transduction for physical and chemical sensing applications. Record relative sensitivity over 600 in the low strain regime (<0.3%) was demonstrated, which represents a key-step for the development of highly sensitive all organic MEMS-based sensors. PMID:27924853

Piezoelectric polymer gated OFET: Cutting-edge electro-mechanical transducer for organic MEMS-based sensors.

PubMed

Thuau, Damien; Abbas, Mamatimin; Wantz, Guillaume; Hirsch, Lionel; Dufour, Isabelle; Ayela, Cédric

2016-12-07

The growth of micro electro-mechanical system (MEMS) based sensors on the electronic market is forecast to be invigorated soon by the development of a new branch of MEMS-based sensors made of organic materials. Organic MEMS have the potential to revolutionize sensor products due to their light weight, low-cost and mechanical flexibility. However, their sensitivity and stability in comparison to inorganic MEMS-based sensors have been the major concerns. In the present work, an organic MEMS sensor with a cutting-edge electro-mechanical transducer based on an active organic field effect transistor (OFET) has been demonstrated. Using poly(vinylidenefluoride/trifluoroethylene) (P(VDF-TrFE)) piezoelectric polymer as active gate dielectric in the transistor mounted on a polymeric micro-cantilever, unique electro-mechanical properties were observed. Such an advanced scheme enables highly efficient integrated electro-mechanical transduction for physical and chemical sensing applications. Record relative sensitivity over 600 in the low strain regime (<0.3%) was demonstrated, which represents a key-step for the development of highly sensitive all organic MEMS-based sensors.

Open Loop Structure Low Cost Integrated Differential Inductive Micro Magnetic Volumetric Bio-Sensors

NASA Astrophysics Data System (ADS)

Khodadadi, Mohammad; Chang, Long; Litvinov, Dimitri

This investigation proposes a study, model, simulate and experiment innovative very low cost Magnetic induction biosensor for point of care diagnostics. The biosensor consists of 2 ``semi-loops'' in a micro fluidic channel, one as a sensor and one as a reference, the design takes advantage of microfabrication processes to produce more precise structures to improve sensitivity. Besides the attractively low cost, this biosensor has many advantages. Since the detector is basically a shaped wire, it is inherently robust and reliable. Typical errors in fabricating the wires will not affect its performance and it is sensing volumetric, unlike GMR-based sensors used in biosensor systems that boast single particle detection. Due to small dimensions the sensors do not need to be calibrated. This sensor also has a large range of detection since its sensitivity is proportional to the excitation frequency. Being able to sense Magnetic nano particles in the volume is an advantage in term of trapping MNPs and sensitivity and functionality. Basically, this new brilliant design, fill the gap between the fabricated sensors and hand wounded sensors.

Material for surface-enhanced Raman spectroscopy, and SER sensors and method for preparing same

NASA Technical Reports Server (NTRS)

Farquharson, Stuart (Inventor); Nelson, Chad (Inventor); Lee, Yuan-Hsiang (Inventor)

2003-01-01

Metal-doped sol-gel materials, suitable for use as sensors for surface-enhanced Raman spectroscopic analysis for trace chemical detection, are produced by effecting gelation and solvent removal of a doped sol-gel under mild temperature conditions. At least in certain instances reaction and drying will desirably be effected in an oxygen-starved environment. The metal of the sol-gel material functions, when irradiated, to produce a plasmon field for interaction with molecules of an analyte in contact therewith, increasing by orders of magnitude Raman photons that are generate by excitation radiation, and the method allows matching of the metal and metal particle size to a wavelength of light (or incident radiation, e.g., laser radiation) to generate surface plasmons. The porosity of the sol-gel material dramatically increases the surface area, and thereby the amount of metal exposed for analyte interaction. The sensors provided may be in the form of glass vials, fiber optics, multi-well micro-sample plates, etc., having surface coatings of the doped sol-gel material, to provide sampling systems for use in a Raman instrument.

A 3D Model of the Thermoelectric Microwave Power Sensor by MEMS Technology.

PubMed

Yi, Zhenxiang; Liao, Xiaoping

2016-06-21

In this paper, a novel 3D model is proposed to describe the temperature distribution of the thermoelectric microwave power sensor. In this 3D model, the heat flux density decreases from the upper surface to the lower surface of the GaAs substrate while it was supposed to be a constant in the 2D model. The power sensor is fabricated by a GaAs monolithic microwave integrated circuit (MMIC) process and micro-electro-mechanical system (MEMS) technology. The microwave performance experiment shows that the S11 is less than -26 dB over the frequency band of 1-10 GHz. The power response experiment demonstrates that the output voltage increases from 0 mV to 27 mV, while the incident power varies from 1 mW to 100 mW. The measured sensitivity is about 0.27 mV/mW, and the calculated result from the 3D model is 0.28 mV/mW. The relative error has been reduced from 7.5% of the 2D model to 3.7% of the 3D model.

A long-term stable power supply µDMFC stack for wireless sensor node applications

NASA Astrophysics Data System (ADS)

Wu, Zonglin; Wang, Xiaohong; Li, Xiaozhao; Xu, Manqi; Liu, Litian

2014-10-01

In this paper, a passive, air-breathing four-cell micro direct methanol fuel cell (µDMFC) stack featuring a fuel delivery structure for long-term and stable power supply is designed, fabricated and tested. The fuel is reserved in a T-shaped tank and diffuses through the porous diffusion layer to the catalyst at the anode. A peak power density of 25.7 mW cm-2 and a maximum power output of 113 mW are achieved with 3 M methanol at room temperature, and the stack can produce 60 mW of power, even though only 5% fuel remains in the reservoir. Combined with a low-input dc-dc convertor, the stack can realize a stable and optional constant voltage output from 1 V-6 V. The stack successfully powered a heavy metal sensor node for water environment monitoring 12 d continuously, with consumption of 10 mL 5 M methanol solution. As such, it is believed to be applicable for powering wireless sensor nodes.

A 3D Model of the Thermoelectric Microwave Power Sensor by MEMS Technology

PubMed Central

Yi, Zhenxiang; Liao, Xiaoping

2016-01-01

In this paper, a novel 3D model is proposed to describe the temperature distribution of the thermoelectric microwave power sensor. In this 3D model, the heat flux density decreases from the upper surface to the lower surface of the GaAs substrate while it was supposed to be a constant in the 2D model. The power sensor is fabricated by a GaAs monolithic microwave integrated circuit (MMIC) process and micro-electro-mechanical system (MEMS) technology. The microwave performance experiment shows that the S11 is less than −26 dB over the frequency band of 1–10 GHz. The power response experiment demonstrates that the output voltage increases from 0 mV to 27 mV, while the incident power varies from 1 mW to 100 mW. The measured sensitivity is about 0.27 mV/mW, and the calculated result from the 3D model is 0.28 mV/mW. The relative error has been reduced from 7.5% of the 2D model to 3.7% of the 3D model. PMID:27338395

Optimization and thermal ASE noise characterization of an all-fibre Sagnac interferometer via LAN for sensing applications

NASA Astrophysics Data System (ADS)

Sierra-Calderon, A.; Rodriguez-Novelo, J. C.; Gamez-Aviles, E.; May-Alarcon, M.; Toral-Cruz, H.; Alvarez-Chavez, J. A.

2016-09-01

The spectral noise characteristic and relative intensity noise of an all fibre Sagnac interferometer system consisting of a 980nm pump source at 130mW maximum output power, a 980/1550nm wavelength division multiplexer, a 10m-piece of Erbium-doped fibre, a fibre Bragg grating (FBG) centered at 1.548um, an optical circulator at 1550nm and a 50/50 fibre coupler, were measured with an optical spectrum analyzer (OSA) for fine tuning for a range of temperature between 5 and 180 degrees Celsius in step of 1 degree Celsius. At the probing end, a high-bi piece of fibre and a Peltier were employed for temperature variation of the system. Spectral and temperature response of the noise reduction due to temperature variation was performed remotely using and Arduino micro-controller and a DS18B20 digital sensor, into a local area network. Full optical and thermal characterization of the system will be included in the presentation.

Micro-Inspector Spacecraft Testbed: Breadboard Subsystem Demonstrations

NASA Astrophysics Data System (ADS)

Mueller, Juergen; Goldberg, Hannah; Alkalai, Leon

2007-01-01

Micro-inspector is a 5-kg inspection platform designed to operate autonomously following operator up-linked command sequences around a host spacecraft to perform safety inspections, anomaly inspections, or imaging of large in-space assemblies as envisioned for future NASA exploration missions. Similarly, such an inspection platform may be adapted to military space missions. Micro-inspector relies on solar power and using celestial sensors for navigation, giving the system large flexibility in the missions and applications it may serve, including those beyond Earth orbit. Micro-Inspector, through its small size and low weight, poses minimal design impacts to the host. Its small size and weight also affords micro-inspector to be disposable, allowing multiple inspectors to be used by a single host for different inspection routines or as emergency back-up. Its low-pressure butane propulsion system combines safety and compactness through liquid propellant storage with an adequate performance of up to 30 m/s for inspection maneuvers around the host. Micro-inspector, since power limited through a body mounted solar array, thus avoiding the complexities of deployable structures, relies on many advanced, ultra-low power micro-technologies, such as a novel microvalve by VACCO Industries in its propulsion system, electrochromic surface modulating heat transfer from the spacecraft using no moving parts, low power dual processor and FPGA-based reconfigurable and SEU mitigating avionics, a low power RF telecom link based on the Mars Micro Transceiver, and micro attitude control sensors, such as commercial micro IMUs and a JPL developed micro sun sensor. Host safety is a key concern, and multiple safety features are employed by micro-inspector to prevent any accidental impact onto the host. Among these is an active, laser-based range-finding collision avoidance system, which constantly monitors the distance to the host and via the micro-inspector's control system maintains a safe distance. Micro-Inspector design, through funding from the NASA Explorations Systems Mission Directorate, has significantly advanced over the past year and is currently at PDR level and beyond. Special emphasis was placed on retiring risk in various subsystem areas through the use of advanced technologies. To this end, a micro-inspector test bed was set up to critically assess the readiness of component technologies and subsystems. Breadboard subsystem demonstrations and system integration were performed to place future design efforts on a solid basis.

Useful method to monitor the physiological effects of alcohol ingestion by combination of micro-integrated laser Doppler blood flow meter and arm-raising test.

PubMed

Iwasaki, Wataru; Nogami, Hirofumi; Ito, Hiroki; Gotanda, Takeshi; Peng, Yao; Takeuchi, Satoshi; Furue, Masutaka; Higurashi, Eiji; Sawada, Renshi

2012-10-01

Alcohol has a variety of effects on the human body, affecting both the sympathetic and parasympathetic nervous system. We examined the peripheral blood flow of alcohol drinkers using a micro-integrated laser Doppler blood flow meter (micro-electromechanical system blood flow sensor). An increased heart rate and blood flow was recorded at the earlobe after alcohol ingestion, and we observed strong correlation between blood flow, heart rate, and breath alcohol content in light drinkers; but not heavy drinkers. We also found that the amplitude of pulse waves measured at the fingertip during an arm-raising test significantly decreased on alcohol consumption, regardless of the individual's alcohol tolerance. Our micro-electromechanical system blood flow sensor successfully detected various physiological changes in peripheral blood circulation induced by alcohol consumption.

Integrated micro-electro-mechanical sensor development for inertial applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

Allen, J.J.; Kinney, R.D.; Sarsfield, J.

Electronic sensing circuitry and micro electro mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper will describe the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.

40 CFR 63.2269 - What are my monitoring installation, operation, and maintenance requirements?

Code of Federal Regulations, 2010 CFR

2010-07-01

... temperature sensor in a position that provides a representative temperature. (2) Use a temperature sensor with... owners manual. Following the electronic calibration, you must conduct a temperature sensor validation check in which a second or redundant temperature sensor placed nearby the process temperature sensor...

40 CFR 63.2269 - What are my monitoring installation, operation, and maintenance requirements?

Code of Federal Regulations, 2011 CFR

2011-07-01

... temperature sensor in a position that provides a representative temperature. (2) Use a temperature sensor with... owners manual. Following the electronic calibration, you must conduct a temperature sensor validation check in which a second or redundant temperature sensor placed nearby the process temperature sensor...

UAV Deployed Sensor System for Arctic Ocean Remote Sensing

NASA Astrophysics Data System (ADS)

Palo, S. E.; Lawrence, D.; Weibel, D.; LoDolce, G.; Krist, S.; Crocker, I.; Maslanik, J. A.

2012-12-01

The Marginal Ice Zone Observations and Processes Experiment (MIZOPEX), is an Arctic field project scheduled for summer 2013. The goals of the project are to understand how warming of the marginal ice zone affects sea ice melt and if this warming has been over or underestimated by satellite measurements. To achieve these goals calibrated physical measurements, both remote and in-situ, of the marginal ice zone over scales of square kilometers with a resolution of square meters is required. This will be accomplished with a suite of unmanned aerial vehicles (UAVs) equipped with both remote sensing and in-situ instruments, air deployed microbuoys, and ship deployed buoys. In this talk we will present details about the air-deployed micro-buoy (ADMB) and self-deployed surface-sonde (SDSS) components of the MIZOPEX project, developed at the University of Colorado. These systems were designed to explore the potential of low-cost, on-demand access to high-latitude areas of important scientific interest. Both the ADMB and SDSS share a common measurement suite with the capability to measure water temperature at three distinct depths and provide position information via GPS. The ADMBs are dropped from the InSitu ScanEagle UAV and expected to operate and log ocean temperatures for 14 days. The SDSS are micro UAVs that are designed to fly one-way to a region of interest and land at specified coordinates, thereafter becoming a surface sensor similar to the ADMB. A ScanEagle will periodically return to the deployment zone to gather ADMB/SDSS data via low power radio links. Design decisions based upon operational constraints and the current status of the ADMB and SDSS will be presented.

Self-assembled micro-/nanostructured WO3 thin films by aqueous chemical growth and their applications in H2 and CO2 sensing

NASA Astrophysics Data System (ADS)

Sone, B. T.; Nkosi, S. S.; Nkosi, M. M.; Coetsee-Hugo, E.; Swart, H. C.; Maaza, M.

2018-05-01

Application of thin film technology is increasing in many areas such as energy production, energy saving, telecommunications, protective and smart coatings, etc. This increased application creates a need for simple, cost-effective methods for the synthesis of highly multifunctional metal oxide thin films. The technique of Aqueous Chemical Growth is presented in this paper as a simple inexpensive means of producing WO3 thin films that find applications in gas sensing, electrochromism and photocatalysis. We demonstrate, through this technique, that heterogeneous nucleation and growth of WO3 thin films on plain glass substrates takes place at low pHs and low temperatures (75-95 °C) without the use of surfactants and template directing methods. The substrates used needed no surface-modification. On the plain glass substrates (soda lime silicates) a variety of micro-nanostructures could be observed most important of which were nanoplatelets that acted as a basic building block for the self-assembly of more hierarchical 3-d microspheres and thin films. The dominant crystallographic structure observed through X-ray diffraction analysis was found to be hexagonal-WO3 and monoclinic WO3. The thin films produced showed a fair degree of porosity. Some of the thin films on glass showed ability to sense, unaided, H2 at 250 °C. Sensor responses were observed to be 1 - 2 orders of magnitude. The films also demonstrated potential to sense CO2 even though this could only be achieved using high concentrations of CO2 gas at temperatures of 300 °C and above. The sensor responses at 300 °C were estimated to be less than 1 order of magnitude.

Injection moulding of optical functional micro structures using laser structured, PVD-coated mould inserts

NASA Astrophysics Data System (ADS)

Hopmann, Ch.; Weber, M.; Schöngart, M.; Schäfer, C.; Bobzin, K.; Bagcivan, N.; Brögelmann, T.; Theiß, S.; Münstermann, T.; Steger, M.

2015-05-01

Micro structured optical plastics components are intensively used i. e. in consumer electronics, for optical sensors in metrology, innovative LED-lighting or laser technology. Injection moulding has proven to be successful for the large-scale production of those parts. However, the production of those parts still causes difficulties due to challenges in the moulding and demoulding of plastics parts created with laser structured mould inserts. A complete moulding of the structures often leads to increased demoulding forces, which then cause a breaking of the structures and a clogging of the mould. An innovative approach is to combine PVD-coated (physical vapour deposition), laser structured inserts and a variothermal moulding process to create functional mic8iüro structures in a one-step process. Therefore, a PVD-coating is applied after the laser structuring process in order to improve the wear resistance and the anti-adhesive properties against the plastics melt. In a series of moulding trials with polycarbonate (PC) and polymethylmethacrylate (PMMA) using different coated moulds, the mould temperature during injection was varied in the range of the glass transition and the melt temperature of the polymers. Subsequently, the surface topography of the moulded parts is evaluated by digital 3D laser-scanning microscopy. The influence of the moulding parameters and the coating of the mould insert on the moulding accuracy and the demoulding behaviour are being analysed. It is shown that micro structures created by ultra-short pulse laser ablation can be successfully replicated in a variothermal moulding process. Due to the mould coating, significant improvements could be achieved in producing micro structured optical plastics components.

Microfabricated Air-Microfluidic Sensor for Personal Monitoring of Airborne Particulate Matter: Design, Fabrication, and Experimental Results

EPA Science Inventory

We present the design and fabrication of a micro electro mechanical systems (MEMS) air-microfluidic particulate matter (PM) sensor, and show experimental results obtained from exposing the sensor to concentrations of tobacco smoke and diesel exhaust, two commonly occurring P...

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements : tech transfer summary.

DOT National Transportation Integrated Search

2016-08-01

Micro-electromechanical sensors and systems- (MEMS)-based and : wireless-based smart-sensing technologies have, until now, rarely : been used for monitoring pavement response in the field, and the : requirements for using such smart sensing technolog...

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

PubMed Central

Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng

2010-01-01

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficient α related to the two frequency shifts is confirmed. PMID:22163588

Micro Electro-Mechanical System (MEMS) Pressure Sensor for Footwear

DOEpatents

Kholwadwala, Deepesh K.; Rohrer, Brandon R.; Spletzer, Barry L.; Galambos, Paul C.; Wheeler, Jason W.; Hobart, Clinton G.; Givler, Richard C.

2008-09-23

Footwear comprises a sole and a plurality of sealed cavities contained within the sole. The sealed cavities can be incorporated as deformable containers within an elastic medium, comprising the sole. A plurality of micro electro-mechanical system (MEMS) pressure sensors are respectively contained within the sealed cavity plurality, and can be adapted to measure static and dynamic pressure within each of the sealed cavities. The pressure measurements can provide information relating to the contact pressure distribution between the sole of the footwear and the wearer's environment.

A time-based front-end ASIC for the silicon micro strip sensors of the bar PANDA Micro Vertex Detector

NASA Astrophysics Data System (ADS)

Di Pietro, V.; Brinkmann, K.-Th.; Riccardi, A.; Ritman, J.; Rivetti, A.; Rolo, M. D.; Stockmanns, T.; Zambanini, A.

2016-03-01

The bar PANDA (Antiproton Annihilation at Darmstadt) experiment foresees many detectors for tracking, particle identification and calorimetry. Among them, the innermost is the MVD (Micro Vertex Detector) responsible for a precise tracking and the reconstruction of secondary vertices. This detector will be built from both hybrid pixel (two inner barrels and six forward disks) and double-sided micro strip (two outer barrels and outer rim of the last two disks) silicon sensors. A time-based approach has been chosen for the readout ASIC of the strip sensors. The PASTA (bar PANDA Strip ASIC) chip aims at high resolution time-stamping and charge information through the Time over Threshold (ToT) technique. It benefits from a Time to Digital Converter (TDC) allowing a time bin width down to 50 ps. The analog front-end was designed to serve both n-type and p-type strips and the performed simulations show remarkable performances in terms of linearity and electronic noise. The TDC consists of an analog interpolator, a digital local controller, and a digital global controller as the common back-end for all of the 64 channels.

Development of novel acoustic wave biosensor platforms based on magnetostriction and fabrication of magnetostrictive nanowires

NASA Astrophysics Data System (ADS)

Li, Suiqiong

There is an urgent need for biosensors that are able to detect and quantify the presence of a small amount of biological threat agents in a real-time manner. Acoustic wave (AW) devices, whose performance is defined by mass sensitivity (Sm) and merit quality factor (Q value), have been extensively studied as high performance biosensor platforms. However, current AW devices face some challenges in practical applications. In this research, two types of AW devices---magnetostrictive microcantilever (MSMC) and completely free-standing magnetostrictive particle (MSP)---were developed. The research consists of two parts: (1) Design and the feasibility study of MSMC and MSP based sensor technology; (2) Fabrication and characterization of micro/nano MSPs made of amorphous Fe-B alloy. Both MSMC and MSP based sensors are wireless/remote and work well in liquid, which makes the sensors good candidates for in-situ detection. The performance of MSMC was simulated and compared with the state of art AW devices: microcantilevers. The MSMC exhibits the following advantages: (1) remote/wireless driving and sensing; (2) ease of fabrication; (3) works well in liquid; (4) exhibits a high Q value (> 500 in air); (5) well suited for sensor array development. MSMCs in milli/micro sizes were fabricated and their performance was characterized in air and liquid. The experimental results confirm the advantages of MSMC mentioned above. The in situ detection of the yeast cells and Bacillus anthracis spores in water were performed using MSMC biosensors. MSPs in the shape of strip and bar were investigated. Strip-shape MSPs in milli/micro sizes were fabricated. The resonance behaviors of MSPs at the even and odd vibration modes were analyzed. MSP exhibits a Sm about 100 times greater, and a Q value about 10 times greater, than MCs. A multiple-sensor and a multiple-target approach were developed to further enhance the performance of MSP-based sensors. A unique methodology was created to detect the target species on the sensor surface at different locations by combining even and odd harmonic mode signals. As with other AW devices, a smaller size results in a higher Sm . To create micro/nano sized MSMC & MSP sensors, amorphous Fe-B thin films and nanowires were fabricated using electrochemical deposition. The microstructure, morphology, composition and magnetic properties of the fabricated nanowires were determined. It is found that the films and the nanowires are excellent candidates for developing micro/nano MSPs and MSMCs.

A Key Pre-Distribution Scheme Based on µ-PBIBD for Enhancing Resilience in Wireless Sensor Networks.

PubMed

Yuan, Qi; Ma, Chunguang; Yu, Haitao; Bian, Xuefen

2018-05-12

Many key pre-distribution (KPD) schemes based on combinatorial design were proposed for secure communication of wireless sensor networks (WSNs). Due to complexity of constructing the combinatorial design, it is infeasible to generate key rings using the corresponding combinatorial design in large scale deployment of WSNs. In this paper, we present a definition of new combinatorial design, termed “µ-partially balanced incomplete block design (µ-PBIBD)”, which is a refinement of partially balanced incomplete block design (PBIBD), and then describe a 2-D construction of µ-PBIBD which is mapped to KPD in WSNs. Our approach is of simple construction which provides a strong key connectivity and a poor network resilience. To improve the network resilience of KPD based on 2-D µ-PBIBD, we propose a KPD scheme based on 3-D Ex-µ-PBIBD which is a construction of µ-PBIBD from 2-D space to 3-D space. Ex-µ-PBIBD KPD scheme improves network scalability and resilience while has better key connectivity. Theoretical analysis and comparison with the related schemes show that key pre-distribution scheme based on Ex-µ-PBIBD provides high network resilience and better key scalability, while it achieves a trade-off between network resilience and network connectivity.

Fiber Optic Sensor Embedment Study for Multi-Parameter Strain Sensing

PubMed Central

Drissi-Habti, Monssef; Raman, Venkadesh; Khadour, Aghiad; Timorian, Safiullah

2017-01-01

The fiber optic sensors (FOSs) are commonly used for large-scale structure monitoring systems for their small size, noise free and low electrical risk characteristics. Embedded fiber optic sensors (FOSs) lead to micro-damage in composite structures. This damage generation threshold is based on the coating material of the FOSs and their diameter. In addition, embedded FOSs are aligned parallel to reinforcement fibers to avoid micro-damage creation. This linear positioning of distributed FOS fails to provide all strain parameters. We suggest novel sinusoidal sensor positioning to overcome this issue. This method tends to provide multi-parameter strains in a large surface area. The effectiveness of sinusoidal FOS positioning over linear FOS positioning is studied under both numerical and experimental methods. This study proves the advantages of the sinusoidal positioning method for FOS in composite material’s bonding. PMID:28333117

An approach to calculating metal particle detection in lubrication oil based on a micro inductive sensor

NASA Astrophysics Data System (ADS)

Wu, Yu; Zhang, Hongpeng

2017-12-01

A new microfluidic chip is presented to enhance the sensitivity of a micro inductive sensor, and an approach to coil inductance change calculation is introduced for metal particle detection in lubrication oil. Electromagnetic knowledge is used to establish a mathematical model of an inductive sensor for metal particle detection, and the analytic expression of coil inductance change is obtained by a magnetic vector potential. Experimental verification is carried out. The results show that copper particles 50-52 µm in diameter have been detected; the relative errors between the theoretical and experimental values are 7.68% and 10.02% at particle diameters of 108-110 µm and 50-52 µm, respectively. The approach presented here can provide a theoretical basis for an inductive sensor in metal particle detection in oil and other areas of application.