Multiple internal seal right micro-electro-mechanical system vacuum package

NASA Technical Reports Server (NTRS)

Shcheglov, Kirill V. (Inventor); Wiberg, Dean V. (Inventor); Hayworth, Ken J. (Inventor); Yee, Karl Y. (Inventor); Bae, Youngsam (Inventor); Challoner, A. Dorian (Inventor); Peay, Chris S. (Inventor)

2007-01-01

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum package that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

Multiple internal seal ring micro-electro-mechanical system vacuum packaging method

NASA Technical Reports Server (NTRS)

Hayworth, Ken J. (Inventor); Yee, Karl Y. (Inventor); Shcheglov, Kirill V. (Inventor); Bae, Youngsam (Inventor); Wiberg, Dean V. (Inventor); Challoner, A. Dorian (Inventor); Peay, Chris S. (Inventor)

2008-01-01

A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements : tech transfer summary.

DOT National Transportation Integrated Search

2016-08-01

Micro-electromechanical sensors and systems- (MEMS)-based and : wireless-based smart-sensing technologies have, until now, rarely : been used for monitoring pavement response in the field, and the : requirements for using such smart sensing technolog...

78 FR 16531 - Certain Microelectromechanical Systems (“MEMS Devices”) and Products Containing Same; Notice of...

Federal Register 2010, 2011, 2012, 2013, 2014

2013-03-15

... INTERNATIONAL TRADE COMMISSION Certain Microelectromechanical Systems (``MEMS Devices'') and... Interest AGENCY: U.S. International Trade Commission. ACTION: Notice. SUMMARY: Notice is hereby given that the U.S. International Trade Commission has received a complaint entitled Certain...

CNT coated thread micro-electro-mechanical system for finger proprioception sensing

NASA Astrophysics Data System (ADS)

Shafi, A. A.; Wicaksono, D. H. B.

2017-04-01

In this paper, we aim to fabricate cotton thread based sensor for proprioceptive application. Cotton threads are utilized as the structural component of flexible sensors. The thread is coated with multi-walled carbon nanotube (MWCNT) dispersion by using facile conventional dipping-drying method. The electrical characterization of the coated thread found that the resistance per meter of the coated thread decreased with increasing the number of dipping. The CNT coated thread sensor works based on piezoresistive theory in which the resistance of the coated thread changes when force is applied. This thread sensor is sewed on glove at the index finger between middle and proximal phalanx parts and the resistance change is measured upon grasping mechanism. The thread based microelectromechanical system (MEMS) enables the flexible sensor to easily fit perfectly on the finger joint and gives reliable response as proprioceptive sensing.

Correlation of embryonic skeletal muscle myotube physical characteristics with contractile force generation on an atomic force microscope-based bio-microelectromechanical systems device

NASA Astrophysics Data System (ADS)

Pirozzi, K. L.; Long, C. J.; McAleer, C. W.; Smith, A. S. T.; Hickman, J. J.

2013-08-01

Rigorous analysis of muscle function in in vitro systems is needed for both acute and chronic biomedical applications. Forces generated by skeletal myotubes on bio-microelectromechanical cantilevers were calculated using a modified version of Stoney's thin-film equation and finite element analysis (FEA), then analyzed for regression to physical parameters. The Stoney's equation results closely matched the more intensive FEA and the force correlated to cross-sectional area (CSA). Normalizing force to measured CSA significantly improved the statistical sensitivity and now allows for close comparison of in vitro data to in vivo measurements for applications in exercise physiology, robotics, and modeling neuromuscular diseases.

Advanced Sensor and Packaging Technologies for Intelligent Adaptive Engine Controls (Preprint)

DTIC Science & Technology

2013-05-01

combination of micro-electromechanical systems (MEMS) sensor technology, novel ceramic materials, high - temperature electronics, and advanced harsh...with simultaneous pressure measurements up to 1,000 psi. The combination of a high - temperature , high -pressure-ratio compressor system, and adaptive...combination of micro-electromechanical systems (MEMS) sensor technology, novel ceramic materials, high temperature electronics, and advanced harsh

Sound wave resonances in micro-electro-mechanical systems devices vibrating at high frequencies according to the kinetic theory of gases

NASA Astrophysics Data System (ADS)

Desvillettes, Laurent; Lorenzani, Silvia

2012-09-01

The mechanism leading to gas damping in micro-electro-mechanical systems (MEMS) devices vibrating at high frequencies is investigated by using the linearized Boltzmann equation based on simplified kinetic models and diffuse reflection boundary conditions. Above a certain frequency of oscillation, the sound waves propagating through the gas are trapped in the gaps between the moving elements and the fixed boundaries of the microdevice. In particular, we found a scaling law, valid for all Knudsen numbers Kn (defined as the ratio between the gas mean free path and a characteristic length of the gas flow), that predicts a resonant response of the system. This response enables a minimization of the damping force exerted by the gas on the oscillating wall of the microdevice.

Mechanical characterization of thin TiO2 films by means of microelectromechanical systems-based cantilevers

NASA Astrophysics Data System (ADS)

Adami, A.; Decarli, M.; Bartali, R.; Micheli, V.; Laidani, N.; Lorenzelli, L.

2010-01-01

The measurement of mechanical parameters by means of microcantilever structures offers a reliable and accurate alternative to traditional methods, especially when dealing with thin films, which are extensively used in microfabrication technology and nanotechnology. In this work, microelectromechanical systems (MEMS)-based piezoresistive cantilevers were realized and used for the determination of Young's modulus and residual stress of thin titanium dioxide (TiO2) deposited by sputtering from a TiO2 target using a rf plasma discharge. Films were deposited at different thicknesses, ranging from a few to a hundred nanometers. Dedicated silicon microcantilevers were designed through an optimization of geometrical parameters with the development of analytical as well as numerical models. Young's modulus and residual stress of sputtered TiO2 films were assessed by using both mechanical characterization based on scanning profilometers and piezoresistive sensing elements integrated in the silicon cantilevers. Results of MEMS-based characterization were combined with the tribological and morphological properties measured by microscratch test and x-ray diffraction analysis.

Micro-Electro-Mechanical Systems (MEMS) Fabrication Course Projects Review for FY15

DTIC Science & Technology

2015-09-01

TECHNICAL DOCUMENT 3298 September 2015 Micro-Electro-Mechanical Systems (MEMS) Fabrication Course Projects Review for FY15 Paul D. Swanson...Naval Warfare Systems Center Pacific (SSC Pacific), San Diego, CA. SSC Pacific’s Naval Innovative Science and Engineering (NISE) Program provided...for Miniaturized Flow Cytometer o Howard Dyckman: 71730 Infrared Waveguides o Teresa Emery: 55360 Bistable MEMS systems for Energy

Microelectromechanical Systems (MEMS) Actuators for Antenna Reconfigurability

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

2001-01-01

A novel microelectromechanical systems (MEMS) actuator for patch antenna reconfiguration, is presented for the first time. A key feature is the capability of multi-band operation without greatly increasing the antenna element dimensions. Experimental results demonstrate that the center frequency can be reconfigured from few hundred MHz to few GHz away from the nominal operating frequency.

Wireless Power Transfer for Autonomous Wearable Neurotransmitter Sensors.

PubMed

Nguyen, Cuong M; Kota, Pavan Kumar; Nguyen, Minh Q; Dubey, Souvik; Rao, Smitha; Mays, Jeffrey; Chiao, J-C

2015-09-23

In this paper, we report a power management system for autonomous and real-time monitoring of the neurotransmitter L-glutamate (L-Glu). A low-power, low-noise, and high-gain recording module was designed to acquire signal from an implantable flexible L-Glu sensor fabricated by micro-electro-mechanical system (MEMS)-based processes. The wearable recording module was wirelessly powered through inductive coupling transmitter antennas. Lateral and angular misalignments of the receiver antennas were resolved by using a multi-transmitter antenna configuration. The effective coverage, over which the recording module functioned properly, was improved with the use of in-phase transmitter antennas. Experimental results showed that the recording system was capable of operating continuously at distances of 4 cm, 7 cm and 10 cm. The wireless power management system reduced the weight of the recording module, eliminated human intervention and enabled animal experimentation for extended durations.

Wireless Power Transfer for Autonomous Wearable Neurotransmitter Sensors

PubMed Central

Nguyen, Cuong M.; Kota, Pavan Kumar; Nguyen, Minh Q.; Dubey, Souvik; Rao, Smitha; Mays, Jeffrey; Chiao, J.-C.

2015-01-01

In this paper, we report a power management system for autonomous and real-time monitoring of the neurotransmitter L-glutamate (L-Glu). A low-power, low-noise, and high-gain recording module was designed to acquire signal from an implantable flexible L-Glu sensor fabricated by micro-electro-mechanical system (MEMS)-based processes. The wearable recording module was wirelessly powered through inductive coupling transmitter antennas. Lateral and angular misalignments of the receiver antennas were resolved by using a multi-transmitter antenna configuration. The effective coverage, over which the recording module functioned properly, was improved with the use of in-phase transmitter antennas. Experimental results showed that the recording system was capable of operating continuously at distances of 4 cm, 7 cm and 10 cm. The wireless power management system reduced the weight of the recording module, eliminated human intervention and enabled animal experimentation for extended durations. PMID:26404311

Death by a Thousand Cuts: Micro-Air Vehicles (MAV) in the Service of Air Force Missions

DTIC Science & Technology

2001-04-01

25 Microjets ...based designs need to overcome high operating temperature limitations.67 Microjets A promising, but technically difficult, propulsion and/or power...source is the microjet , a micro-electromechanical system based device about the size of a dime. These devices are based on micro-turbines that are

Reconfigurable Array Antenna Using Microelectromechanical Systems (MEMS) Actuators

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Chun, Donghoon; Katehi, Linda P. B.

2001-01-01

The paper demonstrates a patch antenna integrated with a novel microelectromechanical systems (MEMS) actuator for reconfiguring the operating frequency. Experimental results demonstrate that the center frequency can be reconfigured by as much as 1.6 percent of the nominal operating frequency at K-Band In addition, a novel on-wafer antenna pattern measurement technique is demonstrated.

Micro-Electromechanical Affinity Sensor for the Monitoring of Glucose in Bioprocess Media

PubMed Central

Theuer, Lorenz; Lehmann, Micha; Junne, Stefan; Neubauer, Peter; Birkholz, Mario

2017-01-01

An affinity-viscometry-based micro-sensor probe for continuous glucose monitoring was investigated with respect to its suitability for bioprocesses. The sensor operates with glucose and dextran competing as binding partner for concanavalin A, while the viscosity of the assay scales with glucose concentration. Changes in viscosity are determined with a micro-electromechanical system (MEMS) in the measurement cavity of the sensor probe. The study aimed to elucidate the interactions between the assay and a typical phosphate buffered bacterial cultivation medium. It turned out that contact with the medium resulted in a significant long-lasting drift of the assay’s viscosity at zero glucose concentration. Adding glucose to the medium lowers the drift by a factor of eight. The cglc values measured off-line with the glucose sensor for monitoring of a bacterial cultivation were similar to the measurements with an enzymatic assay with a difference of less than ±0.15 g·L−1. We propose that lectin agglomeration, the electro-viscous effect, and constitutional changes of concanavalin A due to exchanges of the incorporated metal ions may account for the observed viscosity increase. The study has demonstrated the potential of the MEMS sensor to determine sensitive viscosity changes within very small sample volumes, which could be of interest for various biotechnological applications. PMID:28594350

High energy microelectromechanical oscillator based on the electrostatic microactuator

NASA Astrophysics Data System (ADS)

Baginsky, I.; Kostsov, Edvard; Sobolev, Victor

2008-03-01

Electrostatic high energy micromotor based on the ferroelectric films is studied as applied to microelectromechanical devices operating in vibrational mode. It is shown that the micromotor can be efficiently used in high frequency micromechanical vibrators that are used in high energy MEMS devices, such as micropumps, microvalves, microinjectors, adaptive microoptic devices etc.

A review of microelectromechanical systems for nanoscale mechanical characterization

NASA Astrophysics Data System (ADS)

Zhu, Yong; Chang, Tzu-Hsuan

2015-09-01

A plethora of nanostructures with outstanding properties have emerged over the past decades. Measuring their mechanical properties and understanding their deformation mechanisms is of paramount importance for many of their device applications. To address this need innovative experimental techniques have been developed, among which a promising one is based upon microelectromechanical systems (MEMS). This article reviews the recent advances in MEMS platforms for the mechanical characterization of one-dimensional (1D) nanostructures over the past decade. A large number of MEMS platforms and related nanomechanics studies are presented to demonstrate the unprecedented capabilities of MEMS for nanoscale mechanical characterization. Focusing on key design considerations, this article aims to provide useful guidelines for developing MEMS platforms. Finally, some of the challenges and future directions in the area of MEMS-enabled nanomechanical characterization are discussed.

Long-Wavelength Beam Steerer Based on a Micro-Electromechanical Mirror

PubMed Central

Kos, Anthony B; Gerecht, Eyal

2013-01-01

Commercially available mirrors for scanning long-wavelength beams are too large for high-speed imaging. There is a need for a smaller, more agile pointing apparatus to provide images in seconds, not minutes or hours. A fast long-wavelength beam steerer uses a commercial micro-electro-mechanical system (MEMS) mirror controlled by a high-performance digital signal processor (DSP). The DSP allows high-speed raster scanning of the incident radiation, which is focused to a small waist onto the 9mm2, gold-coated, MEMS mirror surface, while simultaneously acquiring an undistorted, high spatial-resolution image of an object. The beam steerer hardware, software and performance are described. The system can also serve as a miniaturized, high-performance long-wavelength beam chopper for lock-in detection. PMID:26401426

A reducing of a chaotic movement to a periodic orbit, of a micro-electro-mechanical system, by using an optimal linear control design

NASA Astrophysics Data System (ADS)

Chavarette, Fábio Roberto; Balthazar, José Manoel; Felix, Jorge L. P.; Rafikov, Marat

2009-05-01

This paper analyzes the non-linear dynamics, with a chaotic behavior of a particular micro-electro-mechanical system. We used a technique of the optimal linear control for reducing the irregular (chaotic) oscillatory movement of the non-linear systems to a periodic orbit. We use the mathematical model of a (MEMS) proposed by Luo and Wang.

Experimental Characterization of Microfabricated VirtualImpactor Efficiency

EPA Science Inventory

The Air-Microfluidics Group is developing a microelectromechanical systems-based direct reading particulate matter (PM) mass sensor. The sensor consists of two main components: a microfabricated virtual impactor (VI) and a PM mass sensor. The VI leverages particle inertia to sepa...

Systematic characterization of a 1550 nm microelectromechanical (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) with 7.92 THz tuning range for terahertz photomixing systems

NASA Astrophysics Data System (ADS)

Haidar, M. T.; Preu, S.; Cesar, J.; Paul, S.; Hajo, A. S.; Neumeyr, C.; Maune, H.; Küppers, F.

2018-01-01

Continuous-wave (CW) terahertz (THz) photomixing requires compact, widely tunable, mode-hop-free driving lasers. We present a single-mode microelectromechanical system (MEMS)-tunable vertical-cavity surface-emitting laser (VCSEL) featuring an electrothermal tuning range of 64 nm (7.92 THz) that exceeds the tuning range of commercially available distributed-feedback laser (DFB) diodes (˜4.8 nm) by a factor of about 13. We first review the underlying theory and perform a systematic characterization of the MEMS-VCSEL, with particular focus on the parameters relevant for THz photomixing. These parameters include mode-hop-free CW tuning with a side-mode-suppression-ratio >50 dB, a linewidth as narrow as 46.1 MHz, and wavelength and polarization stability. We conclude with a demonstration of a CW THz photomixing setup by subjecting the MEMS-VCSEL to optical beating with a DFB diode driving commercial photomixers. The achievable THz bandwidth is limited only by the employed photomixers. Once improved photomixers become available, electrothermally actuated MEMS-VCSELs should allow for a tuning range covering almost the whole THz domain with a single system.

Performance analysis of an IMU-augmented GNSS tracking system on board the MAIUS-1 sounding rocket

NASA Astrophysics Data System (ADS)

Braun, Benjamin; Grillenberger, Andreas; Markgraf, Markus

2018-05-01

Satellite navigation receivers are adequate tracking sensors for range safety of both orbital launch vehicles and suborbital sounding rockets. Due to high accuracy and its low system complexity, satellite navigation is seen as well-suited supplement or replacement of conventional tracking systems like radar. Having the well-known shortcomings of satellite navigation like deliberate or unintentional interferences in mind, it is proposed to augment the satellite navigation receiver by an inertial measurement unit (IMU) to enhance continuity and availability of localization. The augmented receiver is thus enabled to output at least an inertial position solution in case of signal outages. In a previous study, it was shown by means of simulation using the example of Ariane 5 that the performance of a low-grade microelectromechanical IMU is sufficient to bridge expected outages of some ten seconds, and still meeting the range safety requirements in effect. In this publication, these theoretical findings shall be substantiated by real flight data that were recorded on MAIUS-1, a sounding rocket launched from Esrange, Sweden, in early 2017. The analysis reveals that the chosen representative of a microelectromechanical IMU is suitable to bridge outages of up to thirty seconds.

Capacitive microelectromechanical switches with dynamic soft-landing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Jain, Ankit; Alam, Muhammad Ashraful; Nair, Pradeep R.

2015-10-13

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switchedmore » between the inactivated state and the activated state.« less

Capacitive microelectromechanical switches with dynamic soft-landing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Jain, Ankit; Alam, Muhammad Ashraful; Nair, Pradeep

2017-01-03

A microelectromechanical system (MEMS)-based electrical switch. The electrical switch includes a moveable electrode, a dielectric layer positioned adjacent the moveable electrode on a first side of the dielectric layer and spaced apart from the moveable electrode when the moveable electrode is in an inactivated position and in contact with the moveable electrode when the moveable electrode is in an activated position, and a substrate attached to the dielectric layer on a second side opposite to the first side, the moveable electrode is configured to brake prior to coming in contact with the dielectric layer when the moveable electrode is switchedmore » between the inactivated state and the activated state.« less

Method for spatially modulating X-ray pulses using MEMS-based X-ray optics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lopez, Daniel; Shenoy, Gopal; Wang, Jin

A method and apparatus are provided for spatially modulating X-rays or X-ray pulses using microelectromechanical systems (MEMS) based X-ray optics. A torsionally-oscillating MEMS micromirror and a method of leveraging the grazing-angle reflection property are provided to modulate X-ray pulses with a high-degree of controllability.

Microelectromechanical tunable inductor

DOEpatents

Stalford, Harold L [Norman, OK; Hietala, Vincent M [Albuquerque, NM; Fleming, James G [Albuquerque, NM; Fleming, legal representative, Carol

2010-05-04

A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by side and coiled up about a central axis which is parallel to a supporting substrate. An in-plane stress gradient is responsible for coiling up the coils which. The inductance provided by the tunable inductor can be electrostatically changed either continuously or in discrete steps using electrodes on the substrate and on each coil. The tunable inductor can be formed with processes which are compatible with conventional IC fabrication so that, in some cases, the tunable inductor can be formed on a semiconductor substrate alongside or on top of an IC.

An Evaluation System for the Contact Electrification of a Single Microparticle Using Microelectromechanical-Based Actuated Tweezers.

PubMed

Yamaguchi, Daichi

2018-06-05

The image quality of laser and multi-function printers that make use of electrophotography depends on the amount of surface charge generated by contact electrification on the toner particles. However, because it has been impossible to experimentally evaluate such amounts under controlled contact conditions using macroscopic measurements, theoretical elucidation of the contact electrification mechanism has not progressed sufficiently. In the present study, we have developed a system to experimentally evaluate the contact electrification of a single particle using atomic force microscopy (AFM) and nanotweezers (microelectromechanical systems (MEMS)-based actuated tweezers). This system performs, in succession, (i) a contact test that makes use of the nanotweezers and three piezoelectric stages, and (ii) an image force measurement using the AFM cantilever. Using this system, contact electrification was evaluated under controlled conditions, such as the contact number and the indentation depth. In addition, differences in contact electrification due to the amount of external surface additives were investigated. The results reveal that a coating with external additives leads to a decrease in the amount of contact electrification due to a reduction in the contact area with the substrate.

Control of solid-state lasers using an intra-cavity MEMS micromirror.

PubMed

Lubeigt, Walter; Gomes, Joao; Brown, Gordon; Kelly, Andrew; Savitski, Vasili; Uttamchandani, Deepak; Burns, David

2011-01-31

High reflectivity, electrothermal and electrostatic MEMS (Micro-Electro-Mechanical Systems) micromirrors were used as a control element within a Nd-doped laser cavity. Stable continuous-wave oscillation of a 3-mirror Nd:YLF laser at a maximum output power of 200 mW was limited by thermally-induced surface deformation of the micromirror. An electrostatic micromirror was used to induce Q-switching, resulting in pulse durations of 220 ns - 2 μs over a repetition frequency range of 6 kHz - 40 kHz.

Radio Frequency Microelectromechanical Systems [Book Chapter Manuscript

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nordquist, Christopher; Olsson, Roy H.

2014-12-15

Radio frequency microelectromechanical system (RF MEMS) devices are microscale devices that achieve superior performance relative to other technologies by taking advantage of the accuracy, precision, materials, and miniaturization available through microfabrication. To do this, these devices use their mechanical and electrical properties to perform a specific RF electrical function such as switching, transmission, or filtering. RF MEMS has been a popular area of research since the early 1990s, and within the last several years, the technology has matured sufficiently for commercialization and use in commercial market systems.

Modal parameter identification of a CMUT membrane using response data only

NASA Astrophysics Data System (ADS)

Lardiès, Joseph; Bourbon, Gilles; Moal, Patrice Le; Kacem, Najib; Walter, Vincent; Le, Thien-Phu

2018-03-01

Capacitive micromachined ultrasonic transducers (CMUTs) are microelectromechanical systems used for the generation of ultrasounds. The fundamental element of the transducer is a clamped thin metallized membrane that vibrates under voltage variations. To control such oscillations and to optimize its dynamic response it is necessary to know the modal parameters of the membrane such as resonance frequency, damping and stiffness coefficients. The purpose of this work is to identify these parameters using only the time data obtained from the membrane center displacement. Dynamic measurements are conducted in time domain and we use two methods to identify the modal parameters: a subspace method based on an innovation model of the state-space representation and the continuous wavelet transform method based on the use of the ridge of the wavelet transform of the displacement. Experimental results are presented showing the effectiveness of these two procedures in modal parameter identification.

Through-wafer optical probe characterization for microelectromechanical systems positional state monitoring and feedback control

NASA Astrophysics Data System (ADS)

Dawson, Jeremy M.; Chen, Jingdong; Brown, Kolin S.; Famouri, Parviz F.; Hornak, Lawrence A.

2000-12-01

Implementation of closed-loop microelectromechanical system (MEMS) control enables mechanical microsystems to adapt to the demands of the environment that they are actuating, opening a broad range of new opportunities for future MEMS applications. Integrated optical microsystems have the potential to enable continuous in situ optical interrogation of MEMS microstructure position fully decoupled from the means of mechanical actuation that is necessary for realization of feedback control. We present the results of initial research evaluating through-wafer optical microprobes for surface micromachined MEMS integrated optical position monitoring. Results from the through-wafer free-space optical probe of a lateral comb resonator fabricated using the multiuser MEMS process service (MUMPS) indicate significant positional information content with an achievable return probe signal dynamic range of up to 80% arising from film transmission contrast. Static and dynamic deflection analysis and experimental results indicate a through-wafer probe positional signal sensitivity of 40 mV/micrometers for the present setup or 10% signal change per micrometer. A simulation of the application of nonlinear sliding control is presented illustrating position control of the lateral comb resonator structure given the availability of positional state information.

The Impact of Emerging MEMS-Based Microsystems on US Defense Applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

STAPLE,BEVAN D.; JAKUBCZAK II,JEROME F.

2000-01-20

This paper examines the impact of inserting Micro-Electro-Mechanical Systems (MEMS) into US defense applications. As specific examples, the impacts of micro Inertial Measurement Units (IMUs), radio frequency MEMS (RF MEMS), and Micro-Opto-Electro-Mechanical Systems (MOEMS) to provide integrated intelligence, communication, and control to the defense infrastructure with increased affordability, functionality, and performance are highlighted.

Nano-optomechanical characterization of surface-plasmon-based tunable filter integrated with comb-drive actuator

NASA Astrophysics Data System (ADS)

Honma, H.; Mitsudome, M.; Ishida, M.; Sawada, K.; Takahashi, K.

2017-03-01

We report a tunable plasmonic color filter consisting of a metamaterial periodic grating and microelectromechanical systems (MEMS) actuator. An aluminum subwavelength grating is integrated with electrostatic comb-drive actuators to expand the metal subwavelength period, which allows continuous control of the excitation wavelength of surface plasmons (SPs). We develop a batch fabrication process by employing a liftoff technique using an electron beam resist altered by the electron dose depending on different aspect ratios (length/width) for various components such as the subwavelength grating, nanohinge flexural suspensions, and comb fingers. We successfully demonstrate a continuous shift in the excitation wavelength over the 514-635 nm range by nanopitch expansion. The design margin of the grating period for SP excitation is evaluated by comparing the experimental pitch variation and theoretically calculated values. The resonance frequency of the tunable filter is optically measured to be approximately 10 kHz. The optically and mechanically obtained values agree well with the theory of electrostatic actuation and finite-difference time-domain simulation.

Technologies and Equipment For Military and Public Safety Emergency Response. Technology Needs Performance Deficiencies

DTIC Science & Technology

2001-04-30

APPROACH - Reduce cooling system weight and power thru miniaturization of its compressor, heat exchangers , and other components; and thru highly...research, but a visualized concept provides direction – Microelectromechanical Systems – Nanotech based materials – Fused sensor displays – MCC microtubes ...and Spine impact protection • Anti-Fog Face shield • Flame/ Heat resistance • Compatible with Body Cooling System • Technology Transition to Public

Beyond CMOS: heterogeneous integration of III–V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems

PubMed Central

Kazior, Thomas E.

2014-01-01

Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III–V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III–V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III–V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications. PMID:24567473

Beyond CMOS: heterogeneous integration of III-V devices, RF MEMS and other dissimilar materials/devices with Si CMOS to create intelligent microsystems.

PubMed

Kazior, Thomas E

2014-03-28

Advances in silicon technology continue to revolutionize micro-/nano-electronics. However, Si cannot do everything, and devices/components based on other materials systems are required. What is the best way to integrate these dissimilar materials and to enhance the capabilities of Si, thereby continuing the micro-/nano-electronics revolution? In this paper, I review different approaches to heterogeneously integrate dissimilar materials with Si complementary metal oxide semiconductor (CMOS) technology. In particular, I summarize results on the successful integration of III-V electronic devices (InP heterojunction bipolar transistors (HBTs) and GaN high-electron-mobility transistors (HEMTs)) with Si CMOS on a common silicon-based wafer using an integration/fabrication process similar to a SiGe BiCMOS process (BiCMOS integrates bipolar junction and CMOS transistors). Our III-V BiCMOS process has been scaled to 200 mm diameter wafers for integration with scaled CMOS and used to fabricate radio-frequency (RF) and mixed signals circuits with on-chip digital control/calibration. I also show that RF microelectromechanical systems (MEMS) can be integrated onto this platform to create tunable or reconfigurable circuits. Thus, heterogeneous integration of III-V devices, MEMS and other dissimilar materials with Si CMOS enables a new class of high-performance integrated circuits that enhance the capabilities of existing systems, enable new circuit architectures and facilitate the continued proliferation of low-cost micro-/nano-electronics for a wide range of applications.

Accuracy of a New Patch Pump Based on a Microelectromechanical System (MEMS) Compared to Other Commercially Available Insulin Pumps

PubMed Central

Borot, Sophie; Franc, Sylvia; Cristante, Justine; Penfornis, Alfred; Benhamou, Pierre-Yves; Guerci, Bruno; Hanaire, Hélène; Renard, Eric; Reznik, Yves; Simon, Chantal

2014-01-01

The JewelPUMP™ (JP) is a new patch pump based on a microelectromechanical system that operates without any plunger. The study aimed to evaluate the infusion accuracy of the JP in vitro and in vivo. For the in vitro studies, commercially available pumps meeting the ISO standard were compared to the JP: the MiniMed® Paradigm® 712 (MP), Accu-Chek® Combo (AC), OmniPod® (OP), Animas® Vibe™ (AN). Pump accuracy was measured over 24 hours using a continuous microweighing method, at 0.1 and 1 IU/h basal rates. The occlusion alarm threshold was measured after a catheter occlusion. The JP, filled with physiological serum, was then tested in 13 patients with type 1 diabetes simultaneously with their own pump for 2 days. The weight difference was used to calculate the infused insulin volume. The JP showed reduced absolute median error rate in vitro over a 15-minute observation window compared to other pumps (1 IU/h): ±1.02% (JP) vs ±1.60% (AN), ±1.66% (AC), ±2.22% (MP), and ±4.63% (OP), P < .0001. But there was no difference over 24 hours. At 0.5 IU/h, the JP was able to detect an occlusion earlier than other pumps: 21 (19; 25) minutes vs 90 (85; 95), 58 (42; 74), and 143 (132; 218) minutes (AN, AC, MP), P < .05 vs AN and MP. In patients, the 24-hour flow error was not significantly different between the JP and usual pumps (–2.2 ± 5.6% vs –0.37 ± 4.0%, P = .25). The JP was found to be easier to wear than conventional pumps. The JP is more precise over a short time period, more sensitive to catheter occlusion, well accepted by patients, and consequently, of potential interest for a closed-loop insulin delivery system. PMID:25079676

Engineering Approaches for the Detection and Control of Orthopaedic Biofilm Infections

PubMed Central

Ehrlich, Garth D.; Stoodley, Paul; Kathju, Sandeep; Zhao, Yongjun; McLeod, Bruce R.; Balaban, Naomi; Hu, Fen Ze; Sotereanos, Nicholas G.; Costerton, J. William; Stewart, Philip S.; Post, J. Christopher; Lin, Qiao

2005-01-01

Artificial joints are subject to chronic infections associated with bacterial biofilms, which only can be eradicated by the traumatic removal of the implant followed by sustained intravenous antibiotic therapy. We have adopted an engineering approach to develop electrical–current-based approaches to bacterial eradication and microelectromechanical systems that could be embedded within the implanted joint to detect the presence of bacteria and to provide in situ treatment of the infection before a biofilm can form. In the former case we will examine the combined bactericidal effects of direct and indirect electrical fields in combination with antibiotic therapy. In the latter case, bacterial detection will occur by developing a microelectromechanical–systems-based biosensor that can “eavesdrop” on bacterial quorum–sensing-based communication systems. Treatment will be effected by the release of a cocktail of pharmaceutical reagents contained within integral reservoirs associated with the implant, including a molecular jamming signal that competitively binds to the bacteria’s quorum sensing receptors (which will “blind” the bacteria, preventing the production of toxins) and multiple high dose antibiotics to eradicate the planktonic bacteria. This approach is designed to take advantage of the relatively high susceptibility to antibiotics that planktonic bacteria display compared with biofilm envirovars. Here we report the development of a generic microelectromechanical systems biosensor that measures changes in internal viscosity in a base fluid triggered by a change in the external environment. PMID:16056027

Application of Inkjet-Printing Technology to Micro-Electro-Mechanical Systems

DTIC Science & Technology

2014-05-01

dimensional MEMS using inkjet-printing metal nanoparticles and demonstrated resonant inductive coils, electrostatic-drive motors, and electrothermal actuators...telecommunications base stataions, satellites and defense systems [48]. 1.4 Printed Microshell Encapsulation In this thesis, a fabrication process was...that the solvent of the ink needs to be heat-compatible, which may limit the range of solvent that can be used. For example, most bio -compatible

Microelectromechanical Systems; A DoD Dual Use Technology Industrial Assessment.

DTIC Science & Technology

1995-12-01

systems, • embedded sensors and actuators for condition-based maintenance of machines and vehicles, on-demand amplified structural strength in...will transmit temperature, pressure, and number-of- rotations information to a hand-held receiver used by the maintenance and service personnel. This...automobile industry being the major driver for most micro- machined sensors (pressure, acceleration and oxygen). In 1994 model year Projected Growth

Fabrication of silicon-based shape memory alloy micro-actuators

NASA Technical Reports Server (NTRS)

Johnson, A. David; Busch, John D.; Ray, Curtis A.; Sloan, Charles L.

1992-01-01

Thin film shape memory alloy has been integrated with silicon in a new actuation mechanism for microelectromechanical systems. This paper compares nickel-titanium film with other actuators, describes recent results of chemical milling processes developed to fabricate shape memory alloy microactuators in silicon, and describes simple actuation mechanisms which have been fabricated and tested.

Power Conditioning for MEMS-Based Waste Vibrational Energy Harvester

DTIC Science & Technology

2015-06-01

circuits ...........................................................................................18 Figure 18. Full-wave passive MOSFET rectifier...ABBREVIATIONS AC Alternative Current AlN Aluminum Nitride DC Direct Current LIA Lock-In Amplifier MEMS Microelectromechanical Systems MOSFET ...efficiency is achieved when input voltage is over 2–3 V [14]. Using metal-oxide-semiconductor field-effect transistors ( MOSFETs ) in a rectifier instead of

Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems

NASA Astrophysics Data System (ADS)

Su, Y.; Ong, E. T.; Lee, K. H.

2002-05-01

The past decade has seen an accelerated growth of technology in the field of microelectromechanical systems (MEMS). The development of MEMS products has generated the need for efficient analytical and simulation methods for minimizing the requirement for actual prototyping. The boundary element method is widely used in the electrostatic analysis for MEMS devices. However, singular elements are needed to accurately capture the behavior at singular regions, such as sharp corners and edges, where standard elements fail to give an accurate result. The manual classification of boundary elements based on their singularity conditions is an immensely laborious task, especially when the boundary element model is large. This process can be automated by querying the geometric model of the MEMS device for convex edges based on geometric information of the model. The associated nodes of the boundary elements on these edges can then be retrieved. The whole process is implemented in the MSC/PATRAN platform using the Patran Command Language (the source code is available as supplementary data in the electronic version of this journal issue).

Sleep Estimates Using Microelectromechanical Systems (MEMS)

PubMed Central

te Lindert, Bart H. W.; Van Someren, Eus J. W.

2013-01-01

Study Objectives: Although currently more affordable than polysomnography, actigraphic sleep estimates have disadvantages. Brand-specific differences in data reduction impede pooling of data in large-scale cohorts and may not fully exploit movement information. Sleep estimate reliability might improve by advanced analyses of three-axial, linear accelerometry data sampled at a high rate, which is now feasible using microelectromechanical systems (MEMS). However, it might take some time before these analyses become available. To provide ongoing studies with backward compatibility while already switching from actigraphy to MEMS accelerometry, we designed and validated a method to transform accelerometry data into the traditional actigraphic movement counts, thus allowing for the use of validated algorithms to estimate sleep parameters. Design: Simultaneous actigraphy and MEMS-accelerometry recording. Setting: Home, unrestrained. Participants: Fifteen healthy adults (23-36 y, 10 males, 5 females). Interventions: None. Measurements: Actigraphic movement counts/15-sec and 50-Hz digitized MEMS-accelerometry. Analyses: Passing-Bablok regression optimized transformation of MEMS-accelerometry signals to movement counts. Kappa statistics calculated agreement between individual epochs scored as wake or sleep. Bland-Altman plots evaluated reliability of common sleep variables both between and within actigraphs and MEMS-accelerometers. Results: Agreement between epochs was almost perfect at the low, medium, and high threshold (kappa = 0.87 ± 0.05, 0.85 ± 0.06, and 0.83 ± 0.07). Sleep parameter agreement was better between two MEMS-accelerometers or a MEMS-accelerometer and an actigraph than between two actigraphs. Conclusions: The algorithm allows for continuity of outcome parameters in ongoing actigraphy studies that consider switching to MEMS-accelerometers. Its implementation makes backward compatibility feasible, while collecting raw data that, in time, could provide better sleep estimates and promote cross-study data pooling. Citation: te Lindert BHW; Van Someren EJW. Sleep estimates using microelectromechanical systems (MEMS). SLEEP 2013;36(5):781-789. PMID:23633761

Design of a novel passive flexure-based mechanism for microelectromechanical system optical switch assembly

NASA Astrophysics Data System (ADS)

Zhang, Jianbin; Sun, Xiantao; Chen, Weihai; Chen, Wenjie; Jiang, Lusha

2014-12-01

In microelectromechanical system (MEMS) optical switch assembly, the collision always exists between the optical fiber and the edges of the U-groove due to the positioning errors between them. It will cause the irreparable damage since the optical fiber and the silicon-made U-groove are usually very fragile. Typical solution is first to detect the positioning errors by the machine vision or high-resolution sensors and then to actively eliminate them with the aid of the motion of precision mechanisms. However, this method will increase the cost and complexity of the system. In this paper, we present a passive compensation method to accommodate the positioning errors. First, we study the insertion process of the optical fiber into the U-groove to analyze all possible positioning errors as well as the conditions of successful insertion. Then, a novel passive flexure-based mechanism based on the remote center of compliance concept is designed to satisfy the required insertion condition. The pseudo-rigid-body-model method is utilized to calculate the stiffness of the mechanism along the different directions, which is verified by finite element analysis (FEA). Finally, a prototype of the passive flexure-based mechanism is fabricated for performance tests. Both FEA and experimental results indicate that the designed mechanism can be used to the MEMS optical switch assembly.

Design of a novel passive flexure-based mechanism for microelectromechanical system optical switch assembly.

PubMed

Zhang, Jianbin; Sun, Xiantao; Chen, Weihai; Chen, Wenjie; Jiang, Lusha

2014-12-01

In microelectromechanical system (MEMS) optical switch assembly, the collision always exists between the optical fiber and the edges of the U-groove due to the positioning errors between them. It will cause the irreparable damage since the optical fiber and the silicon-made U-groove are usually very fragile. Typical solution is first to detect the positioning errors by the machine vision or high-resolution sensors and then to actively eliminate them with the aid of the motion of precision mechanisms. However, this method will increase the cost and complexity of the system. In this paper, we present a passive compensation method to accommodate the positioning errors. First, we study the insertion process of the optical fiber into the U-groove to analyze all possible positioning errors as well as the conditions of successful insertion. Then, a novel passive flexure-based mechanism based on the remote center of compliance concept is designed to satisfy the required insertion condition. The pseudo-rigid-body-model method is utilized to calculate the stiffness of the mechanism along the different directions, which is verified by finite element analysis (FEA). Finally, a prototype of the passive flexure-based mechanism is fabricated for performance tests. Both FEA and experimental results indicate that the designed mechanism can be used to the MEMS optical switch assembly.

Design and Fabrication of a Miniaturized GMI Magnetic Sensor Based on Amorphous Wire by MEMS Technology

PubMed Central

Chen, Jiawen; Li, Jianhua; Li, Yiyuan; Chen, Yulong

2018-01-01

A miniaturized Co-based amorphous wire GMI (Giant magneto-impedance) magnetic sensor was designed and fabricated in this paper. The Co-based amorphous wire was used as the sense element due to its high sensitivity to the magnetic field. A three-dimensional micro coil surrounding the Co-based amorphous wire was fabricated by MEMS (Micro-Electro-Mechanical System) technology, which was used to extract the electrical signal. The three-dimensional micro pick-up coil was designed and simulated with HFSS (High Frequency Structure Simulator) software to determine the key parameters. Surface micro machining MEMS (Micro-Electro-Mechanical System) technology was employed to fabricate the three-dimensional coil. The size of the developed amorphous wire magnetic sensor is 5.6 × 1.5 × 1.1 mm3. Helmholtz coil was used to characterize the performance of the device. The test results of the sensor sample show that the voltage change is 130 mV/Oe and the linearity error is 4.83% in the range of 0~45,000 nT. The results indicate that the developed miniaturized magnetic sensor has high sensitivity. By testing the electrical resistance of the samples, the results also showed high uniformity of each device. PMID:29494477

Miniature near-infrared dual-axes confocal microscope utilizing a two-dimensional microelectromechanical systems scanner

PubMed Central

Liu, Jonathan T. C.; Mandella, Michael J.; Ra, Hyejun; Wong, Larry K.; Solgaard, Olav; Kino, Gordon S.; Piyawattanametha, Wibool; Contag, Christopher H.; Wang, Thomas D.

2007-01-01

The first, to our knowledge, miniature dual-axes confocal microscope has been developed, with an outer diameter of 10 mm, for subsurface imaging of biological tissues with 5–7 μm resolution. Depth-resolved en face images are obtained at 30 frames per second, with a field of view of 800 × 100 μm, by employing a two-dimensional scanning microelectromechanical systems mirror. Reflectance and fluorescence images are obtained with a laser source at 785 nm, demonstrating the ability to perform real-time optical biopsy. PMID:17215937

Microelectromechanical Systems for Aerodynamics Applications

NASA Technical Reports Server (NTRS)

Mehregany, Mehran; DeAnna, Russell G.; Reshotko, Eli

1996-01-01

Microelectromechanical systems (MEMS) embody the integration of sensors, actuators, and electronics on a single substrate using integrated circuit fabrication techniques and compatible micromachining processes. Silicon and its derivatives form the material base for the MEMS technology. MEMS devices, including micro-sensors and micro-actuators, are attractive because they can be made small (characteristic dimension about microns), be produced in large numbers with uniform performance, include electronics for high performance and sophisticated functionality, and be inexpensive. MEMS pressure sensors, wall-shear-stress sensors, and micromachined hot-wires are nearing application in aeronautics. MEMS actuators face a tougher challenge since they have to be scaled (up) to the physical phenomena that are being controlled. MEMS actuators are proposed, for example, for controlling the small structures in a turbulent boundary layer, for aircraft control, for cooling, and for mixing enhancement. Data acquisition or control logistics require integration of electronics along with the transducer elements with appropriate consideration of analog-to-digital conversion, multiplexing, and telemetry. Altogether, MEMS technology offers exciting opportunities for aerodynamics applications both in wind tunnels and in flight

Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems

NASA Astrophysics Data System (ADS)

Fichtner, Simon; Wolff, Niklas; Krishnamurthy, Gnanavel; Petraru, Adrian; Bohse, Sascha; Lofink, Fabian; Chemnitz, Steffen; Kohlstedt, Hermann; Kienle, Lorenz; Wagner, Bernhard

2017-07-01

Enhancing the piezoelectric activity of AlN by partially substituting Al with Sc to form Al1-xScxN is a promising approach to improve the performance of piezoelectric micro-electromechanical systems. Here, we present evidence of an instability in the morphology of Al1-xScxN, which originates at, or close to, the substrate/Al1-xScxN interface and becomes more pronounced as the Sc content is increased. Based on Transmission electron microscopy, piezoresponse force microscopy, X-ray diffraction, and SEM analysis, it is identified to be the incipient formation of (100) oriented grains. Approaches to successfully reestablish exclusive c-axis orientation up to x = 0.43 are revealed, with electrode pre-treatment and cathode-substrate distance found to exert significant influence. This allows us to present first measurements of the transversal thin film piezoelectric coefficient e31,f and dielectric loss tangent tan δ beyond x = 0.3.

Compliant displacement-multiplying apparatus for microelectromechanical systems

DOEpatents

Kota, Sridhar; Rodgers, M. Steven; Hetrick, Joel A.

2001-01-01

A pivotless compliant structure is disclosed that can be used to increase the geometric advantage or mechanical advantage of a microelectromechanical (MEM) actuator such as an electrostatic comb actuator, a capacitive-plate electrostatic actuator, or a thermal actuator. The compliant structure, based on a combination of interconnected flexible beams and cross-beams formed of one or more layers of polysilicon or silicon nitride, can provide a geometric advantage of from about 5:1 to about 60:1 to multiply a 0.25-3 .mu.m displacement provided by a short-stroke actuator so that such an actuator can be used to generate a displacement stroke of about 10-34 .mu.m to operate a ratchet-driven MEM device or a microengine. The compliant structure has less play than conventional displacement-multiplying devices based on lever arms and pivoting joints, and is expected to be more reliable than such devices. The compliant structure and an associated electrostatic or thermal actuator can be formed on a common substrate (e.g. silicon) using surface micromachining.

Design and implementation of fiber-based multiphoton endoscopy with microelectromechanical systems scanning

PubMed Central

Tang, Shuo; Jung, Woonggyu; McCormick, Daniel; Xie, Tuqiang; Su, Jiangping; Ahn, Yeh-Chan; Tromberg, Bruce J.; Chen, Zhongping

2010-01-01

A multiphoton endoscopy system has been developed using a two-axis microelectromechanical systems (MEMS) mirror and double-cladding photonic crystal fiber (DCPCF). The MEMS mirror has a 2-mm-diam, 20-deg optical scanning angle, and 1.26-kHz and 780-Hz resonance frequencies on the x and y axes. The maximum number of resolvable focal spots of the MEMS scanner is 720×720 on the x and y axes, which indicates that the MEMS scanner can potentially support high-resolution multiphoton imaging. The DCPCF is compared with standard single-mode fiber and hollow-core photonic bandgap fiber on the basis of dispersion, attenuation, and coupling efficiency properties. The DCPCF has high collection efficiency, and its dispersion can be compensated by grating pairs. Three configurations of probe design are investigated, and their imaging quality and field of view are compared. A two-lens configuration with a collimation and a focusing lens provides the optimum imaging performance and packaging flexibility. The endoscope is applied to image fluorescent microspheres and bovine knee joint cartilage. PMID:19566298

Improved response time of flexible microelectromechanical sensors employing eco-friendly nanomaterials.

PubMed

Fan, Shicheng; Dan, Li; Meng, Lingju; Zheng, Wei; Elias, Anastasia; Wang, Xihua

2017-11-09

Flexible force/pressure sensors are of interest for academia and industry and have applications in wearable technologies. Most of such sensors on the market or reported in journal publications are based on the operation mechanism of probing capacitance or resistance changes of the materials under pressure. Recently, we reported the microelectromechanical (MEM) sensors based on a different mechanism: mechanical switches. Multiples of such MEM sensors can be integrated to achieve the same function of regular force/pressure sensors while having the advantages of ease of fabrication and long-term stability in operation. Herein, we report the dramatically improved response time (more than one order of magnitude) of these MEM sensors by employing eco-friendly nanomaterials-cellulose nanocrystals. For instance, the incorporation of polydimethysiloxane filled with cellulose nanocrystals shortened the response time of MEM sensors from sub-seconds to several milliseconds, leading to the detection of both diastolic and systolic pressures in the radial arterial blood pressure measurement. Comprehensive mechanical and electrical characterization of the materials and the devices reveal that greatly enhanced storage modulus and loss modulus play key roles in this improved response time. The demonstrated fast-response flexible sensors enabled continuous monitoring of heart rate and complex cardiovascular signals using pressure sensors for future wearable sensing platforms.

Microelectromechanical Systems (MEMS) Photoacoustic (PA) Detector of Terahertz (THz) Radiation for Chemical Sensing

DTIC Science & Technology

2014-03-01

26 Feb 2014 Ivan Medvedev, PhD (Member) Date iv AFIT-ENG-14-M-58 Abstract In this research effort, a Microelectromechanical...7. Separation by implantation of oxygen (SIMOX) is a process of creating silicon- on-insulator (SOI) wafers. Oxygen ions are implanted into a silicon...wafer. The depth of the insulating layer is dependent upon the power used during ion implantation [14]. .............................. 16  Figure 8

Microelectromechanical systems-based visible-near infrared Fabry-Perot tunable filters using quartz substrate

NASA Astrophysics Data System (ADS)

Gupta, Neelam; Tan, Songsheng; Zander, Dennis R.

2012-07-01

There is a need to develop miniature optical tunable filters for small hyperspectral imagers. We plan to develop a number of miniature Fabry-Perot tunable filters (FPTFs) using microelectromechanical systems (MEMS) technology, each operating over a different wavelength region, to cover spectral regions from the visible to the longwave infrared (IR). Use of a MEMS-based FPTF as a dispersive element will reduce the size, weight, and power requirements of hyperspectral imagers and make them less expensive. A key requirement for such a filter is a large optical aperture. Recently, we succeeded in fabricating FPTFs with a 6 mm optical aperture operating in the visible to near IR spectral region (400 to 800 nm) using commercially available thin quartz wafers as the substrate. The FPTF design contains one fixed silver (Ag) mirror and one electrostatically movable Ag mirror, each grown on a quartz substrate with a low total thickness variation. Gold (Au) bumps are used to control the initial air gap distance between the two mirrors, and Au-Au bonding is used to bond the device. We describe material selection, device design, modeling, fabrication, interferometric, and spectral characterizations.

Design and fabrication of vibration based energy harvester using microelectromechanical system piezoelectric cantilever for low power applications.

PubMed

Kim, Moonkeun; Lee, Sang-Kyun; Yang, Yil Suk; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

2013-12-01

We fabricated dual-beam cantilevers on the microelectromechanical system (MEMS) scale with an integrated Si proof mass. A Pb(Zr,Ti)O3 (PZT) cantilever was designed as a mechanical vibration energy-harvesting system for low power applications. The resonant frequency of the multilayer composition cantilevers were simulated using the finite element method (FEM) with parametric analysis carried out in the design process. According to simulations, the resonant frequency, voltage, and average power of a dual-beam cantilever was 69.1 Hz, 113.9 mV, and 0.303 microW, respectively, at optimal resistance and 0.5 g (gravitational acceleration, m/s2). Based on these data, we subsequently fabricated cantilever devices using dual-beam cantilevers. The harvested power density of the dual-beam cantilever compared favorably with the simulation. Experiments revealed the resonant frequency, voltage, and average power density to be 78.7 Hz, 118.5 mV, and 0.34 microW, respectively. The error between the measured and simulated results was about 10%. The maximum average power and power density of the fabricated dual-beam cantilever at 1 g were 0.803 microW and 1322.80 microW cm(-3), respectively. Furthermore, the possibility of a MEMS-scale power source for energy conversion experiments was also tested.

Initial performance results for high-aspect ratio gold MEMS deformable mirrors

NASA Astrophysics Data System (ADS)

Fernández, Bautista; Kubby, Joel

2009-02-01

The fabrication and initial performance results of high-aspect ratio 3-dimensional Micro-Electro-Mechanical System (MEMS) Deformable Mirrors (DM) for Adaptive Optics (AO) will be discussed. The DM systems were fabricated out of gold, and consist of actuators bonded to a continuous face sheet, with different boundary conditions. DM mirror displacements vs. voltage have been measured with a white light interferometer and the corresponding results compared to Finite Element Analysis (FEA) simulations. Interferometer scans of a DM have shown that ~9.4um of stroke can be achieved with low voltage, thus showing that this fabrication process holds promise in the manufacturing of future MEMS DM's for the next generation of extremely large telescopes.

Microelectromechanical Systems

NASA Technical Reports Server (NTRS)

Gabriel, Kaigham J.

1995-01-01

Micro-electromechanical systems (MEMS) is an enabling technology that merges computation and communication with sensing and actuation to change the way people and machines interact with the physical world. MEMS is a manufacturing technology that will impact widespread applications including: miniature inertial measurement measurement units for competent munitions and personal navigation; distributed unattended sensors; mass data storage devices; miniature analytical instruments; embedded pressure sensors; non-invasive biomedical sensors; fiber-optics components and networks; distributed aerodynamic control; and on-demand structural strength. The long term goal of ARPA's MEMS program is to merge information processing with sensing and actuation to realize new systems and strategies for both perceiving and controlling systems, processes, and the environment. The MEMS program has three major thrusts: advanced devices and processes, system design, and infrastructure.

Velocity-Aided Attitude Estimation for Helicopter Aircraft Using Microelectromechanical System Inertial-Measurement Units.

PubMed

Lee, Sang Cheol; Hong, Sung Kyung

2016-12-11

This paper presents an algorithm for velocity-aided attitude estimation for helicopter aircraft using a microelectromechanical system inertial-measurement unit. In general, high- performance gyroscopes are used for estimating the attitude of a helicopter, but this type of sensor is very expensive. When designing a cost-effective attitude system, attitude can be estimated by fusing a low cost accelerometer and a gyro, but the disadvantage of this method is its relatively low accuracy. The accelerometer output includes a component that occurs primarily as the aircraft turns, as well as the gravitational acceleration. When estimating attitude, the accelerometer measurement terms other than gravitational ones can be considered as disturbances. Therefore, errors increase in accordance with the flight dynamics. The proposed algorithm is designed for using velocity as an aid for high accuracy at low cost. It effectively eliminates the disturbances of accelerometer measurements using the airspeed. The algorithm was verified using helicopter experimental data. The algorithm performance was confirmed through a comparison with an attitude estimate obtained from an attitude heading reference system based on a high accuracy optic gyro, which was employed as core attitude equipment in the helicopter.

Velocity-Aided Attitude Estimation for Helicopter Aircraft Using Microelectromechanical System Inertial-Measurement Units

PubMed Central

Lee, Sang Cheol; Hong, Sung Kyung

2016-01-01

This paper presents an algorithm for velocity-aided attitude estimation for helicopter aircraft using a microelectromechanical system inertial-measurement unit. In general, high- performance gyroscopes are used for estimating the attitude of a helicopter, but this type of sensor is very expensive. When designing a cost-effective attitude system, attitude can be estimated by fusing a low cost accelerometer and a gyro, but the disadvantage of this method is its relatively low accuracy. The accelerometer output includes a component that occurs primarily as the aircraft turns, as well as the gravitational acceleration. When estimating attitude, the accelerometer measurement terms other than gravitational ones can be considered as disturbances. Therefore, errors increase in accordance with the flight dynamics. The proposed algorithm is designed for using velocity as an aid for high accuracy at low cost. It effectively eliminates the disturbances of accelerometer measurements using the airspeed. The algorithm was verified using helicopter experimental data. The algorithm performance was confirmed through a comparison with an attitude estimate obtained from an attitude heading reference system based on a high accuracy optic gyro, which was employed as core attitude equipment in the helicopter. PMID:27973429

Demonstration of a linear optical true-time delay device by use of a microelectromechanical mirror array.

PubMed

Rader, Amber; Anderson, Betty Lise

2003-03-10

We present the design and proof-of-concept demonstration of an optical device capable of producing true-time delay(s) (TTD)(s) for phased array antennas. This TTD device uses a free-space approach consisting of a single microelectromechanical systems (MEMS) mirror array in a multiple reflection spherical mirror configuration based on the White cell. Divergence is avoided by periodic refocusing by the mirrors. By using the MEMS mirror to switch between paths of different lengths, time delays are generated. Six different delays in 1-ns increments were demonstrated by using the Texas Instruments Digital Micromirror Device as the switching element. Losses of 1.6 to 5.2 dB per bounce and crosstalk of -27 dB were also measured, both resulting primarily from diffraction from holes in each pixel and the inter-pixel gaps of the MEMS.

Thermoelastic Damping in FGM Nano-Electromechanical System in Axial Vibration Based on Eringen Nonlocal Theory

NASA Astrophysics Data System (ADS)

Rahimi, Z.; Rashahmadi, S.

2017-11-01

The thermo-elastic damping is a dominant source of internal damping in micro-electromechanical systems (MEMS) and nano-electromechanical systems (NEMS). The internal damping cannot neither be controlled nor minimized unless either mechanical or geometrical properties are changed. Therefore, a novel FGMNEM system with a controllable thermo-elastic damping of axial vibration based on Eringen nonlocal theory is considered. The effects of different parameter like the gradient index, nonlocal parameter, length of nanobeam and ambient temperature on the thermo-elastic damping quality factor are presented. It is shown that the thermo-elastic damping can be controlled by changing different parameter.

Diffraction leveraged modulation of X-ray pulses using MEMS-based X-ray optics

DOEpatents

Lopez, Daniel; Shenoy, Gopal; Wang, Jin; Walko, Donald A.; Jung, Il-Woong; Mukhopadhyay, Deepkishore

2016-08-09

A method and apparatus are provided for implementing Bragg-diffraction leveraged modulation of X-ray pulses using MicroElectroMechanical systems (MEMS) based diffractive optics. An oscillating crystalline MEMS device generates a controllable time-window for diffraction of the incident X-ray radiation. The Bragg-diffraction leveraged modulation of X-ray pulses includes isolating a particular pulse, spatially separating individual pulses, and spreading a single pulse from an X-ray pulse-train.

Micro-electro-mechanically switchable near infrared complementary metamaterial absorber

DOE Office of Scientific and Technical Information (OSTI.GOV)

Pitchappa, Prakash; Pei Ho, Chong; Institute of Microelectronics

2014-05-19

We experimentally demonstrate a micro-electro-mechanically switchable near infrared complementary metamaterial absorber by integrating the metamaterial layer to be the out of plane movable microactuator. The metamaterial layer is electrostatically actuated by applying voltage across the suspended complementary metamaterial layer and the stationary bottom metallic reflector. Thus, the effective spacing between the metamaterial layer and bottom metal reflector is varied as a function of applied voltage. With the reduction of effective spacing between the metamaterial and reflector layers, a strong spectral blue shift in the peak absorption wavelength can be achieved. With spacing change of 300 nm, the spectral shift of 0.7 μmmore » in peak absorption wavelength was obtained for near infrared spectral region. The electro-optic switching performance of the device was characterized, and a striking switching contrast of 1500% was achieved at 2.1 μm. The reported micro-electro-mechanically tunable complementary metamaterial absorber device can potentially enable a wide range of high performance electro-optical devices, such as continuously tunable filters, modulators, and electro-optic switches that form the key components to facilitate future photonic circuit applications.« less

A review of micro-contact physics for microelectromechanical systems (MEMS) metal contact switches

NASA Astrophysics Data System (ADS)

Toler, Benjamin F.; Coutu, Ronald A., Jr.; McBride, John W.

2013-10-01

Innovations in relevant micro-contact areas are highlighted, these include, design, contact resistance modeling, contact materials, performance and reliability. For each area the basic theory and relevant innovations are explored. A brief comparison of actuation methods is provided to show why electrostatic actuation is most commonly used by radio frequency microelectromechanical systems designers. An examination of the important characteristics of the contact interface such as modeling and material choice is discussed. Micro-contact resistance models based on plastic, elastic-plastic and elastic deformations are reviewed. Much of the modeling for metal contact micro-switches centers around contact area and surface roughness. Surface roughness and its effect on contact area is stressed when considering micro-contact resistance modeling. Finite element models and various approaches for describing surface roughness are compared. Different contact materials to include gold, gold alloys, carbon nanotubes, composite gold-carbon nanotubes, ruthenium, ruthenium oxide, as well as tungsten have been shown to enhance contact performance and reliability with distinct trade offs for each. Finally, a review of physical and electrical failure modes witnessed by researchers are detailed and examined.

Microelectromechanical system pressure sensor integrated onto optical fiber by anodic bonding.

PubMed

Saran, Anish; Abeysinghe, Don C; Boyd, Joseph T

2006-03-10

Optical microelectromechanical system pressure sensors based on the principle of Fabry-Perot interferometry have been developed and fabricated using the technique of silicon-to-silicon anodic bonding. The pressure sensor is then integrated onto an optical fiber by a novel technique of anodic bonding without use of any adhesives. In this anodic bonding technique we use ultrathin silicon of thickness 10 microm to bond the optical fiber to the sensor head. The ultrathin silicon plays the role of a stress-reducing layer, which helps the bonding of an optical fiber to silicon having conventional wafer thickness. The pressure-sensing membrane is formed by 8 microm thick ultrathin silicon acting as a membrane, thus eliminating the need for bulk silicon etching. The pressure sensor integrated onto an optical fiber is tested for static response, and experimental results indicate degradation in the fringe visibility of the Fabry-Perot interferometer. This effect was mainly due to divergent light rays from the fiber degrading the fringe visibility. This effect is demonstrated in brief by an analytical model.

Low frequency noise in the unstable contact region of Au-to-Au microcontact for microelectromechanical system switches

DOE Office of Scientific and Technical Information (OSTI.GOV)

Qiu, Haodong; Wang, Hong, E-mail: ewanghong@ntu.edu.sg; Ke, Feixiang

The noise behavior of Au-to-Au microcontact for microelectromechanical system switches has been experimentally studied in the unstable contact region. The results suggest that the electrical conduction remains nonmetallic at the initial stage during contact formation due to the existence of alien films, and traps in the alien layer located at the contact interface could play an important role in determining the conduction noise. The conduction fluctuation induced by electron trapping-detrapping associated with the hydrocarbon layer is found to be an intrinsic noise source contributing to the low frequency noise in the unstable contact region.

A flexoelectric microelectromechanical system on silicon.

PubMed

Bhaskar, Umesh Kumar; Banerjee, Nirupam; Abdollahi, Amir; Wang, Zhe; Schlom, Darrell G; Rijnders, Guus; Catalan, Gustau

2016-03-01

Flexoelectricity allows a dielectric material to polarize in response to a mechanical bending moment and, conversely, to bend in response to an electric field. Compared with piezoelectricity, flexoelectricity is a weak effect of little practical significance in bulk materials. However, the roles can be reversed at the nanoscale. Here, we demonstrate that flexoelectricity is a viable route to lead-free microelectromechanical and nanoelectromechanical systems. Specifically, we have fabricated a silicon-compatible thin-film cantilever actuator with a single flexoelectrically active layer of strontium titanate with a figure of merit (curvature divided by electric field) of 3.33 MV(-1), comparable to that of state-of-the-art piezoelectric bimorph cantilevers.

Low frequency noise in the unstable contact region of Au-to-Au microcontact for microelectromechanical system switches

NASA Astrophysics Data System (ADS)

Qiu, Haodong; Wang, Hong; Ke, Feixiang

2014-06-01

The noise behavior of Au-to-Au microcontact for microelectromechanical system switches has been experimentally studied in the unstable contact region. The results suggest that the electrical conduction remains nonmetallic at the initial stage during contact formation due to the existence of alien films, and traps in the alien layer located at the contact interface could play an important role in determining the conduction noise. The conduction fluctuation induced by electron trapping-detrapping associated with the hydrocarbon layer is found to be an intrinsic noise source contributing to the low frequency noise in the unstable contact region.

Infrared imaging and acoustic sizing of a bubble inside a micro-electro-mechanical system piezo ink channel

NASA Astrophysics Data System (ADS)

van der Bos, Arjan; Segers, Tim; Jeurissen, Roger; van den Berg, Marc; Reinten, Hans; Wijshoff, Herman; Versluis, Michel; Lohse, Detlef

2011-08-01

Piezo drop-on-demand inkjet printers are used in an increasing number of applications because of their reliable deposition of droplets onto a substrate. Droplets of a few picoliters are ejected from an inkjet nozzle at frequencies of up to 100 kHz. However, the entrapment of an air microbubble in the ink channel can severely impede the productivity and reliability of the printing system. The air bubble disturbs the channel acoustics, resulting in disrupted drop formation or failure of the jetting process. Here we study a micro-electro-mechanical systems-based printhead. By using the actuating piezo transducer in receive mode, the acoustical field inside the channel was monitored, clearly identifying the presence of an air microbubble inside the channel during failure of the jetting process. The infrared visualization technique allowed for the accurate sizing of the bubble, including its dynamics, inside the intact printhead. A model was developed to calculate the mutual interaction between the channel acoustics and the bubble dynamics. The model was validated by simultaneous acoustical and infrared detection of the bubble. The model can predict the presence and size of entrapped air bubbles inside an operating ink channel purely from the acoustic response.

Initial animal studies of a wireless, batteryless, MEMS implant for cardiovascular applications.

PubMed

Najafi, Nader; Ludomirsky, Achiau

2004-03-01

This paper reports the results of the initial animal studies of a wireless, batteryless, implantable pressure sensor using microelectromechanical systems (MEMS) technology. The animal studies were acute and proved the functional feasibility of using MEMS technology for wireless bio sensing. The results are very encouraging and surpassed the majority of the application's requirements, including high sampling speed and high resolution. Based on the lessons learned, second generation wireless sensors are being developed that will provide total system solution.

A compact linear accelerator based on a scalable microelectromechanical-system RF-structure

DOE PAGES

Persaud, A.; Ji, Q.; Feinberg, E.; ...

2017-06-08

Here, a new approach for a compact radio-frequency (RF) accelerator structure is presented. The new accelerator architecture is based on the Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) structure that was first developed in the 1980s. The MEQALAC utilized RF resonators producing the accelerating fields and providing for higher beam currents through parallel beamlets focused using arrays of electrostatic quadrupoles (ESQs). While the early work obtained ESQs with lateral dimensions on the order of a few centimeters, using a printed circuit board (PCB), we reduce the characteristic dimension to the millimeter regime, while massively scaling up the potential number ofmore » parallel beamlets. Using Microelectromechanical systems scalable fabrication approaches, we are working on further red ucing the characteristic dimension to the sub-millimeter regime. The technology is based on RF-acceleration components and ESQs implemented in the PCB or silicon wafers where each beamlet passes through beam apertures in the wafer. The complete accelerator is then assembled by stacking these wafers. This approach has the potential for fast and inexpensive batch fabrication of the components and flexibility in system design for application specific beam energies and currents. For prototyping the accelerator architecture, the components have been fabricated using the PCB. In this paper, we present proof of concept results of the principal components using the PCB: RF acceleration and ESQ focusing. Finally, ongoing developments on implementing components in silicon and scaling of the accelerator technology to high currents and beam energies are discussed.« less

A compact linear accelerator based on a scalable microelectromechanical-system RF-structure

NASA Astrophysics Data System (ADS)

Persaud, A.; Ji, Q.; Feinberg, E.; Seidl, P. A.; Waldron, W. L.; Schenkel, T.; Lal, A.; Vinayakumar, K. B.; Ardanuc, S.; Hammer, D. A.

2017-06-01

A new approach for a compact radio-frequency (RF) accelerator structure is presented. The new accelerator architecture is based on the Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) structure that was first developed in the 1980s. The MEQALAC utilized RF resonators producing the accelerating fields and providing for higher beam currents through parallel beamlets focused using arrays of electrostatic quadrupoles (ESQs). While the early work obtained ESQs with lateral dimensions on the order of a few centimeters, using a printed circuit board (PCB), we reduce the characteristic dimension to the millimeter regime, while massively scaling up the potential number of parallel beamlets. Using Microelectromechanical systems scalable fabrication approaches, we are working on further reducing the characteristic dimension to the sub-millimeter regime. The technology is based on RF-acceleration components and ESQs implemented in the PCB or silicon wafers where each beamlet passes through beam apertures in the wafer. The complete accelerator is then assembled by stacking these wafers. This approach has the potential for fast and inexpensive batch fabrication of the components and flexibility in system design for application specific beam energies and currents. For prototyping the accelerator architecture, the components have been fabricated using the PCB. In this paper, we present proof of concept results of the principal components using the PCB: RF acceleration and ESQ focusing. Ongoing developments on implementing components in silicon and scaling of the accelerator technology to high currents and beam energies are discussed.

A compact linear accelerator based on a scalable microelectromechanical-system RF-structure.

PubMed

Persaud, A; Ji, Q; Feinberg, E; Seidl, P A; Waldron, W L; Schenkel, T; Lal, A; Vinayakumar, K B; Ardanuc, S; Hammer, D A

2017-06-01

A new approach for a compact radio-frequency (RF) accelerator structure is presented. The new accelerator architecture is based on the Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) structure that was first developed in the 1980s. The MEQALAC utilized RF resonators producing the accelerating fields and providing for higher beam currents through parallel beamlets focused using arrays of electrostatic quadrupoles (ESQs). While the early work obtained ESQs with lateral dimensions on the order of a few centimeters, using a printed circuit board (PCB), we reduce the characteristic dimension to the millimeter regime, while massively scaling up the potential number of parallel beamlets. Using Microelectromechanical systems scalable fabrication approaches, we are working on further reducing the characteristic dimension to the sub-millimeter regime. The technology is based on RF-acceleration components and ESQs implemented in the PCB or silicon wafers where each beamlet passes through beam apertures in the wafer. The complete accelerator is then assembled by stacking these wafers. This approach has the potential for fast and inexpensive batch fabrication of the components and flexibility in system design for application specific beam energies and currents. For prototyping the accelerator architecture, the components have been fabricated using the PCB. In this paper, we present proof of concept results of the principal components using the PCB: RF acceleration and ESQ focusing. Ongoing developments on implementing components in silicon and scaling of the accelerator technology to high currents and beam energies are discussed.

Process for fabricating a microelectromechanical structure

DOEpatents

Sniegowski, Jeffry J.; Krygowski, Thomas W.; Mani, Seethambal S.; Habermehl, Scott D.; Hetherington, Dale L.; Stevens, James E.; Resnick, Paul J.; Volk, Steven R.

2004-10-26

A process is disclosed for forming a microelectromechanical (MEM) structure on a substrate having from 5 to 6 or more layers of deposited and patterned polysilicon. The process is based on determining a radius of curvature of the substrate which is bowed due to accumulated stress in the layers of polysilicon and a sacrificial material used to buildup the MEM structure, and then providing one or more stress-compensation layers on a backside of the substrate to flatten the substrate and allow further processing.

MEMS-based thermoelectric infrared sensors: A review

NASA Astrophysics Data System (ADS)

Xu, Dehui; Wang, Yuelin; Xiong, Bin; Li, Tie

2017-12-01

In the past decade, micro-electromechanical systems (MEMS)-based thermoelectric infrared (IR) sensors have received considerable attention because of the advances in micromachining technology. This paper presents a review of MEMS-based thermoelectric IR sensors. The first part describes the physics of the device and discusses the figures of merit. The second part discusses the sensing materials, thermal isolation microstructures, absorber designs, and packaging methods for these sensors and provides examples. Moreover, the status of sensor implementation technology is examined from a historical perspective by presenting findings from the early years to the most recent findings.

MEMS/ECD Method for Making Bi(2-x)Sb(x)Te3 Thermoelectric Devices

NASA Technical Reports Server (NTRS)

Lim, James; Huang, Chen-Kuo; Ryan, Margaret; Snyder, G. Jeffrey; Herman, Jennifer; Fleurial, Jean-Pierre

2008-01-01

A method of fabricating Bi(2-x)Sb(x)Te3-based thermoelectric microdevices involves a combination of (1) techniques used previously in the fabrication of integrated circuits and of microelectromechanical systems (MEMS) and (2) a relatively inexpensive MEMS-oriented electrochemical-deposition (ECD) technique. The present method overcomes the limitations of prior MEMS fabrication techniques and makes it possible to satisfy requirements.

Array Phase Shifters: Theory and Technology

NASA Technical Reports Server (NTRS)

Romanofsky, Robert R.

2007-01-01

While there are a myriad of applications for microwave phase shifters in instrumentation and metrology, power combining, amplifier linearization, and so on, the most prevalent use is in scanning phased-array antennas. And while this market continues to be dominated by military radar and tracking platforms, many commercial applications have emerged in the past decade or so. These new and potential applications span low-Earth-orbit (LEO) communications satellite constellations and collision warning radar, an aspect of the Intelligent Vehicle Highway System or Automated Highway System. In any case, the phase shifters represent a considerable portion of the overall antenna cost, with some estimates approaching 40 percent for receive arrays. Ferrite phase shifters continue to be the workhorse in military-phased arrays, and while there have been advances in thin film ferrite devices, the review of this device technology in the previous edition of this book is still highly relevant. This chapter will focus on three types of phase shifters that have matured in the past decade: GaAs MESFET monolithic microwave integrated circuit (MMIC), micro-electromechanical systems (MEMS), and thin film ferroelectric-based devices. A brief review of some novel devices including thin film ferrite phase shifters and superconducting switches for phase shifter applications will be provided. Finally, the effects of modulo 2 phase shift limitations, phase errors, and transient response on bit error rate degradation will be considered.

Major new thrust for MEMS engines.

PubMed

Wilson, J R

2003-02-01

The application of microelectromechanical systems (MEMS) to space flight is reviewed. The applications include use as microthrusters on mini-size and smaller satellites, in missile defense systems, and as propulsion systems for miniature unmanned aerial vehicles.

MEMS device for spacecraft thermal control applications

NASA Technical Reports Server (NTRS)

Swanson, Theordore D. (Inventor)

2003-01-01

A micro-electromechanical device that comprises miniaturized mechanical louvers, referred to as Micro Electro-Mechanical Systems (MEMS) louvers are employed to achieve a thermal control function for spacecraft and instruments. The MEMS louvers are another form of a variable emittance control coating and employ micro-electromechanical technology. In a function similar to traditional, macroscopic thermal louvers, the MEMS louvers of the present invention change the emissivity of a surface. With the MEMS louvers, as with the traditional macroscopic louvers, a mechanical vane or window is opened and closed to allow an alterable radiative view to space.

Method for fabricating five-level microelectromechanical structures and microelectromechanical transmission formed

DOEpatents

Rodgers, M. Steven; Sniegowski, Jeffry J.; Miller, Samuel L.; McWhorter, Paul J.

2000-01-01

A process for forming complex microelectromechanical (MEM) devices having five layers or levels of polysilicon, including four structural polysilicon layers wherein mechanical elements can be formed, and an underlying polysilicon layer forming a voltage reference plane. A particular type of MEM device that can be formed with the five-level polysilicon process is a MEM transmission for controlling or interlocking mechanical power transfer between an electrostatic motor and a self-assembling structure (e.g. a hinged pop-up mirror for use with an incident laser beam). The MEM transmission is based on an incomplete gear train and a bridging set of gears that can be moved into place to complete the gear train to enable power transfer. The MEM transmission has particular applications as a safety component for surety, and for this purpose can incorporate a pin-in-maze discriminator responsive to a coded input signal.

Formaldehyde gas sensor based on TiO2 thin membrane integrated with nano silicon structure

NASA Astrophysics Data System (ADS)

Zheng, Xuan; Ming, An-jie; Ye, Li; Chen, Feng-hua; Sun, Xi-long; Liu, Wei-bing; Li, Chao-bo; Ou, Wen; Wang, Wei-bing; Chen, Da-peng

2016-07-01

An innovative formaldehyde gas sensor based on thin membrane type metal oxide of TiO2 layer was designed and fabricated. This sensor under ultraviolet (UV) light emitting diode (LED) illumination exhibits a higher response to formaldehyde than that without UV illumination at low temperature. The sensitivities of the sensor under steady working condition were calculated for different gas concentrations. The sensitivity to formaldehyde of 7.14 mg/m3 is about 15.91 under UV illumination with response time of 580 s and recovery time of 500 s. The device was fabricated through micro-electro-mechanical system (MEMS) processing technology. First, plasma immersion ion implantation (PIII) was adopted to form black polysilicon, then a nanoscale TiO2 membrane with thickness of 53 nm was deposited by DC reactive magnetron sputtering to obtain the sensing layer. By such fabrication approaches, the nanoscale polysilicon presents continuous rough surface with thickness of 50 nm, which could improve the porosity of the sensing membrane. The fabrication process can be mass-produced for the MEMS process compatibility.

Microelectromechanical systems(MEMS): Launching Research Concepts into the Marketplace

NASA Astrophysics Data System (ADS)

Arney, Susanne

1999-04-01

More than a decade following the demonstration of the first spinning micromotors and microgears, the field of microelectromechanical systems (MEMS) has burgeoned on a worldwide basis. Integrated circuit design, fabrication, and packaging techniques have provided the foundation for the growth of an increasingly mature MEMS infrastructure which spans numerous topics of research as well as industrial application. The remarkable proliferation of MEMS concepts into such contrasting arenas of application as automotive sensors, biology, optical and wireless telecommunications, displays, printing, and physics experiments will be described. Challenges to commercialization of research prototypes will be discussed with emphasis on the development of design, fabrication, packaging, reliability and standards which fundamentally enable the application of MEMS to a highly diversified marketplace.

Development of a Microelectromechanical System for Small Satellite Thermal Control

DTIC Science & Technology

2004-05-06

polymer frame or post over a silicon substrate. The membrane should be coated with a high emissivity material. This design was based on the principle...allowing heat conduction to the silicon. While the device was off, both the poor thermal conductivity of the polymer and the gap between membrane and...EnergyThermally Isolating Vacuum and Polymer Heat Conduction (a) (b) Figure 4. Heat conduction and radiation in the on and off states

Optical Fiber Protection

NASA Technical Reports Server (NTRS)

1999-01-01

F&S Inc. developed and commercialized fiber optic and microelectromechanical systems- (MEMS) based instrumentation for harsh environments encountered in the aerospace industry. The NASA SBIR programs have provided F&S the funds and the technology to develop ruggedized coatings and coating techniques that are applied during the optical fiber draw process. The F&S optical fiber fabrication facility and developed coating methods enable F&S to manufacture specialty optical fiber with custom designed refractive index profiles and protective or active coatings. F&S has demonstrated sputtered coatings using metals and ceramics and combinations of each, and has also developed techniques to apply thin coatings of specialized polyimides formulated at NASA Langley Research Center. With these capabilities, F&S has produced cost-effective, reliable instrumentation and sensors capable of withstanding temperatures up to 800? C and continues building commercial sales with corporate partners and private funding. More recently, F&S has adapted the same sensing platforms to provide the rapid detection and identification of chemical and biological agents

Adaptive optics in multiphoton microscopy: comparison of two, three and four photon fluorescence

PubMed Central

Sinefeld, David; Paudel, Hari P.; Ouzounov, Dimitre G.; Bifano, Thomas G.; Xu, Chris

2015-01-01

We demonstrate adaptive optics system based on nonlinear feedback from 3- and 4-photon fluorescence. The system is based on femtosecond pulses created by soliton self-frequency shift of a 1550-nm fiber-based femtosecond laser together with micro-electro-mechanical system (MEMS) phase spatial light modulator (SLM). We perturb the 1020-segment SLM using an orthogonal Walsh sequence basis set with a modified version of three-point phase shifting interferometry. We show the improvement after aberrations correction in 3-photon signal from fluorescent beads. In addition, we compare the improvement obtained in the same adaptive optical system for 2-, 3- and 4-photon fluorescence using dye pool. We show that signal improvement resulting from aberration correction grows exponentially as a function of the order of nonlinearity. PMID:26698772

A Microelectromechanical High-Density Energy Storage/Rapid Release System

DOE Office of Scientific and Technical Information (OSTI.GOV)

Rodgers, M. Steven; Allen, Jim J.; Meeks, Kent D.

1999-07-21

One highly desirable characteristic of electrostatically driven microelectromechanical systems (MEMS) is that they consume very little power. The corresponding drawback is that the force they produce may be inadequate for many applications. It has previously been demonstrated that gear reduction units or microtransmissions can substantially increase the torque generated by microengines. Operating speed, however, is also reduced by the transmission gear ratio. Some applications require both high speed and high force. If this output is only required for a limited period of time, then energy could be stored in a mechanical system and rapidly released upon demand. We have designed,more » fabricated, and demonstrated a high-density energy storage/rapid release system that accomplishes this task. Built using a 5-level surface micromachining technology, the assembly closely resembles a medieval crossbow. Energy releases on the order of tens of nanojoules have already been demonstrated, and significantly higher energy systems are under development.« less

Microelectromechanical high-density energy storage/rapid release system

NASA Astrophysics Data System (ADS)

Rodgers, M. Steven; Allen, James J.; Meeks, Kent D.; Jensen, Brian D.; Miller, Samuel L.

1999-08-01

One highly desirable characteristic of electrostatically driven microelectromechanical systems (MEMS) is that they consume very little power. The corresponding drawback is that the force they produce may be inadequate for many applications. It has previously been demonstrated that gear reduction units or microtransmissions can substantially increase the torque generated by microengines. Operating speed, however, is also reduced by the transmission gear ratio. Some applications require both high speed and high force. If this output is only required for a limited period of time, then energy could be stored in a mechanical system and rapidly released upon demand. We have designed, fabricated, and demonstrated a high-density energy storage/rapid release system that accomplishes this task. Built using a 5-level surface micromachining technology, the assembly closely resembles a medieval crossbow. Energy releases on the order of tens of nanojoules have already been demonstrated, and significantly higher energy systems are under development.

Delamination study of chip-to-chip bonding for a LIGA-based safety and arming system

NASA Astrophysics Data System (ADS)

Subramanian, Gowrishankar; Deeds, Michael; Cochran, Kevin R.; Raghavan, Raghu; Sandborn, Peter A.

1999-08-01

The development of a miniature underwater weapon safety and arming system requires reliable chip-to-chip bonding of die that contain microelectromechanical actuators and sensors fabricated using a LIGA MEMS fabrication process. Chip-to- chip bonding is associated for several different bond materials (indium solder, thermoplastic paste, thermoplastic film and epoxy film), and bonding configurations (with an alloy 42 spacer, silicon to ceramic, and silicon to silicon). Metrology using acoustic micro imaging has been developed to determine the fraction of delamination of samples.

Microelectromechanical Systems and Nephrology: The Next Frontier in Renal Replacement Technology

PubMed Central

Kim, Steven; Roy, Shuvo

2013-01-01

Microelectromechanical systems (MEMS) is playing a prominent role in the development of many new and innovative biomedical devices, but remains a relatively underutilized technology in nephrology. The future landscape of clinical medicine and research will only see further expansion of MEMS based technologies in device designs and applications. The enthusiasm stems from the ability to create small-scale device features with high precision in a cost effective manner. MEMS also offers the possibility to integrate multiple components into a single device. The adoption of MEMS has the potential to revolutionize how nephrologists manage kidney disease by improving the delivery of renal replacement therapies and enhancing the monitoring of physiologic parameters. To introduce nephrologists to MEMS, this review will first define relevant terms and describe the basic processes used to fabricate MEMS devices. Next, a survey of MEMS devices being developed for various biomedical applications will be illustrated with current examples. Finally, MEMS technology specific to nephrology will be highlighted and future applications will be examined. The adoption of MEMS offers novel avenues to improve the care of kidney disease patients and assist nephrologists in clinical practice. This review will serve as an introduction for nephrologists to the exciting world of MEMS. PMID:24206604

"Lollipop-shaped" high-sensitivity Microelectromechanical Systems vector hydrophone based on Parylene encapsulation

NASA Astrophysics Data System (ADS)

Liu, Yuan; Wang, Renxin; Zhang, Guojun; Du, Jin; Zhao, Long; Xue, Chenyang; Zhang, Wendong; Liu, Jun

2015-07-01

This paper presents methods of promoting the sensitivity of Microelectromechanical Systems (MEMS) vector hydrophone by increasing the sensing area of cilium and perfect insulative Parylene membrane. First, a low-density sphere is integrated with the cilium to compose a "lollipop shape," which can considerably increase the sensing area. A mathematic model on the sensitivity of the "lollipop-shaped" MEMS vector hydrophone is presented, and the influences of different structural parameters on the sensitivity are analyzed via simulation. Second, the MEMS vector hydrophone is encapsulated through the conformal deposition of insulative Parylene membrane, which enables underwater acoustic monitoring without any typed sound-transparent encapsulation. Finally, the characterization results demonstrate that the sensitivity reaches up to -183 dB (500 Hz 0dB at 1 V/ μPa ), which is increased by more than 10 dB, comparing with the previous cilium-shaped MEMS vector hydrophone. Besides, the frequency response takes on a sensitivity increment of 6 dB per octave. The working frequency band is 20-500 Hz and the concave point depth of 8-shaped directivity is beyond 30 dB, indicating that the hydrophone is promising in underwater acoustic application.

Recent Advances in High-Resolution MEMS DM Fabrication and Integration

NASA Astrophysics Data System (ADS)

Bifano, T.; Cornelissen, S.; Bierden, P.

2010-09-01

Deformable mirrors fabricated using microelectromechanical systems technology (MEMS-DMs) have been studied at Boston University (BU) and developed/commercialized by Boston Micromachines Corporation (BMC) over the past decade. Recent advances that might have an impact on surveillance telescopes include demonstration of 4092 actuator DMs with continuous mirror face-sheets, and segmented DMs capable of frame rates of greater than 20kHz for devices with up to 1020 independent segments. The 4092 actuator DM, developed by BMC for the Gemini Planet Imaging GPI instrument, was recently delivered to the GPI instrument development team. Its packaging and platform development are described, and the performance results for the latest prototype devices are presented.

Aerospace Sensor Component and Subsystem Investigation and Innovation-2 Component Exploration and Development (ASCSII-2 CED) Delivery Order 0003: Hermetically Sealed Cavities in 3-D GaAs-Silicon and Silicon-Silicon Packages for Microelectromechanical System (MEMS) Devices Using Selective and Large-Scale Bonding

DTIC Science & Technology

2003-03-01

and silicon-to-silicon to produce cavities for 3-D assembly of MEMS devices has been demonstrated using SnAgCu and eutectic SnPb solders. Laser and...of GaAs-to-silicon and silicon-to-silicon to produce cavities for 3-D assembly of MEMS devices has been demonstrated using SnAgCu and euctectic...research_images/ 3.2 Solder Reflow The reflow profile for SnAgCu solder was developed on the Sikama convection/ conduction reflow oven using a continuous

GaAs-based resonant tunneling diode (RTD) epitaxy on Si for highly sensitive strain gauge applications.

PubMed

Li, Jie; Guo, Hao; Liu, Jun; Tang, Jun; Ni, Haiqiao; Shi, Yunbo; Xue, Chenyang; Niu, Zhichuan; Zhang, Wendong; Li, Mifeng; Yu, Ying

2013-05-08

As a highly sensitive strain gauge element, GaAs-based resonant tunneling diode (RTD) has already been applied in microelectromechanical system (MEMS) sensors. Due to poor mechanical properties and high cost, GaAs-based material has been limited in applications as the substrate for MEMS. In this work, we present a method to fabricate the GaAs-based RTD on Si substrate. From the experimental results, it can be concluded that the piezoresistive coefficient achieved with this method reached 3.42 × 10-9 m2/N, which is about an order of magnitude higher than the Si-based semiconductor piezoresistors.

TOPICAL REVIEW: Ultra-thin film encapsulation processes for micro-electro-mechanical devices and systems

NASA Astrophysics Data System (ADS)

Stoldt, Conrad R.; Bright, Victor M.

2006-05-01

A range of physical properties can be achieved in micro-electro-mechanical systems (MEMS) through their encapsulation with solid-state, ultra-thin coatings. This paper reviews the application of single source chemical vapour deposition and atomic layer deposition (ALD) in the growth of submicron films on polycrystalline silicon microstructures for the improvement of microscale reliability and performance. In particular, microstructure encapsulation with silicon carbide, tungsten, alumina and alumina-zinc oxide alloy ultra-thin films is highlighted, and the mechanical, electrical, tribological and chemical impact of these overlayers is detailed. The potential use of solid-state, ultra-thin coatings in commercial microsystems is explored using radio frequency MEMS as a case study for the ALD alloy alumina-zinc oxide thin film.

Improved Fibroblast Functionalities by Microporous Pattern Fabricated by Microelectromechanical Systems

PubMed Central

Wei, Hongbo; Zhao, Lingzhou; Chen, Bangdao; Bai, Shizhu; Zhao, Yimin

2014-01-01

Fibroblasts, which play an important role in biological seal formation and maintenance, determine the long-term success of percutaneous implants. In this study, well-defined microporous structures with micropore diameters of 10–60 µm were fabricated by microelectromechanical systems and their influence on the fibroblast functionalities was observed. The results show that the microporous structures with micropore diameters of 10–60 µm did not influence the initial adherent fibroblast number; however, those with diameters of 40 and 50 µm improved the spread, actin stress fiber organization, proliferation and fibronectin secretion of the fibroblasts. The microporous structures with micropore diameters of 40–50 µm may be promising for application in the percutaneous part of an implant. PMID:25054322

A novel approach to the analysis of squeezed-film air damping in microelectromechanical systems

NASA Astrophysics Data System (ADS)

Yang, Weilin; Li, Hongxia; Chatterjee, Aveek N.; Elfadel, Ibrahim (Abe M.; Ender Ocak, Ilker; Zhang, TieJun

2017-01-01

Squeezed-film damping (SFD) is a phenomenon that significantly affects the performance of micro-electro-mechanical systems (MEMS). The total damping force in MEMS mainly include the viscous damping force and elastic damping force. Quality factor (Q factor) is usually used to evaluate the damping in MEMS. In this work, we measure the Q factor of a resonator through experiments in a wide range of pressure levels. In fact, experimental characterizations of MEMS have some limitations because it is difficult to conduct experiments at very high vacuum and also hard to differentiate the damping mechanisms from the overall Q factor measurements. On the other hand, classical theoretical analysis of SFD is restricted to strong assumptions and simple geometries. In this paper, a novel numerical approach, which is based on lattice Boltzmann simulations, is proposed to investigate SFD in MEMS. Our method considers the dynamics of squeezed air flow as well as fluid-solid interactions in MEMS. It is demonstrated that Q factor can be directly predicted by numerical simulation, and our simulation results agree well with experimental data. Factors that influence SFD, such as pressure, oscillating amplitude, and driving frequency, are investigated separately. Furthermore, viscous damping and elastic damping forces are quantitatively compared based on comprehensive simulation. The proposed numerical approach as well as experimental characterization enables us to reveal the insightful physics of squeezed-film air damping in MEMS.

Micro-electro-mechanical systems phosphoric acid fuel cell

DOEpatents

Sopchak, David A [Livermore, CA; Morse, Jeffrey D [Martinez, CA; Upadhye, Ravindra S [Pleasanton, CA; Kotovsky, Jack [Oakland, CA; Graff, Robert T [Modesto, CA

2010-08-17

A phosphoric acid fuel cell system comprising a porous electrolyte support, a phosphoric acid electrolyte in the porous electrolyte support, a cathode electrode contacting the phosphoric acid electrolyte, and an anode electrode contacting the phosphoric acid electrolyte.

Micro-electro-mechanical systems phosphoric acid fuel cell

DOEpatents

Sopchak, David A.; Morse, Jeffrey D.; Upadhye, Ravindra S.; Kotovsky, Jack; Graff, Robert T.

2010-12-21

A phosphoric acid fuel cell system comprising a porous electrolyte support, a phosphoric acid electrolyte in the porous electrolyte support, a cathode electrode contacting the phosphoric acid electrolyte, and an anode electrode contacting the phosphoric acid electrolyte.

Useful method to monitor the physiological effects of alcohol ingestion by combination of micro-integrated laser Doppler blood flow meter and arm-raising test.

PubMed

Iwasaki, Wataru; Nogami, Hirofumi; Ito, Hiroki; Gotanda, Takeshi; Peng, Yao; Takeuchi, Satoshi; Furue, Masutaka; Higurashi, Eiji; Sawada, Renshi

2012-10-01

Alcohol has a variety of effects on the human body, affecting both the sympathetic and parasympathetic nervous system. We examined the peripheral blood flow of alcohol drinkers using a micro-integrated laser Doppler blood flow meter (micro-electromechanical system blood flow sensor). An increased heart rate and blood flow was recorded at the earlobe after alcohol ingestion, and we observed strong correlation between blood flow, heart rate, and breath alcohol content in light drinkers; but not heavy drinkers. We also found that the amplitude of pulse waves measured at the fingertip during an arm-raising test significantly decreased on alcohol consumption, regardless of the individual's alcohol tolerance. Our micro-electromechanical system blood flow sensor successfully detected various physiological changes in peripheral blood circulation induced by alcohol consumption.

Hybrid Micro-Electro-Mechanical Tunable Filter

DTIC Science & Technology

2007-09-01

Figure 2.10), one can see the developers have used surface micromachining techniques to build the micromirror structure over the CMOS addressing...DBRs, microcavity composition, initial air gap, contact layers, substrate Dispersion Data Curve -fit dispersion data or generate dispersion function...measurements • Curve -fit the dispersion data or generate a continuous, wavelength-dependent, representation of material dispersion • Manually design the

Nanotechnology Applications for Glaucoma.

PubMed

Cetinel, Sibel; Montemagno, Carlo

2016-01-01

Glaucoma is the second leading cause of blindness worldwide, and the antiglaucoma treatments currently available suffer from various complications. Nanotechnology-based treatments show a great deal of promise in overcoming these complications and form the basis for next-generation glaucoma treatment strategies, with the help of applications such as controlled release, targeted delivery, increased bioavailability, diffusion limitations, and biocompatibility. Significant progress has been made in nanomedicine in the efficiency of antiglaucoma medications, nanofabrication systems such as microelectromechanical systems that remove the limitations of nanodevices, and tissue regeneration vesicles for developing glaucoma treatments not based on intraocular pressure. With the use of these advanced technologies, the prevention of glaucoma-induced blindness will be possible in the near future. Herein, we reviewed the recent advances in nanotechnology-based treatment strategies for glaucoma.

The Quake-Catcher Network: An Innovative Community-Based Seismic Network

NASA Astrophysics Data System (ADS)

Saltzman, J.; Cochran, E. S.; Lawrence, J. F.; Christensen, C. M.

2009-12-01

The Quake-Catcher Network (QCN) is a volunteer computing seismic network that engages citizen scientists, teachers, and museums to participate in the detection of earthquakes. In less than two years, the network has grown to over 1000 participants globally and continues to expand. QCN utilizes Micro-Electro-Mechanical System (MEMS) accelerometers, in laptops and external to desktop computers, to detect moderate to large earthquakes. One goal of the network is to involve K-12 classrooms and museums by providing sensors and software to introduce participants to seismology and community-based scientific data collection. The Quake-Catcher Network provides a unique opportunity to engage participants directly in the scientific process, through hands-on activities that link activities and outcomes to their daily lives. Partnerships with teachers and museum staff are critical to growth of the Quake Catcher Network. Each participating institution receives a MEMS accelerometer to connect, via USB, to a computer that can be used for hands-on activities and to record earthquakes through a distributed computing system. We developed interactive software (QCNLive) that allows participants to view sensor readings in real time. Participants can also record earthquakes and download earthquake data that was collected by their sensor or other QCN sensors. The Quake-Catcher Network combines research and outreach to improve seismic networks and increase awareness and participation in science-based research in K-12 schools.

In vivo endoscopic optical coherence tomography by use of a rotational microelectromechanical system probe

NASA Astrophysics Data System (ADS)

Tran, Peter H.; Mukai, David S.; Brenner, Matthew; Chen, Zhongping

2004-06-01

A novel endoscopic optical coherence tomography probe was designed and constructed with a 1.9-mm microelectromechanical system (MEMS) motor. The new MEMS endoscopic probe design eliminates the need to couple the rotational energy from the proximal to the distal end of the probe. Furthermore, the endoscopic probe's sheath and fiber have the advantages of having a much smaller diameter and being more flexible than traditional endoscopes since no reinforcement is needed to couple the rotational torque. At the distal end, a prism mounted on a micromotor deflects the light rays to create a transverse circular-scanning pathway. Because our MEMS scanner does not require the coupling of a rotational single-mode fiber, a high scanning speed is possible while eliminating unstable optical signals caused by nonuniform coupling.

Wire-bonder-assisted integration of non-bondable SMA wires into MEMS substrates

NASA Astrophysics Data System (ADS)

Fischer, A. C.; Gradin, H.; Schröder, S.; Braun, S.; Stemme, G.; van der Wijngaart, W.; Niklaus, F.

2012-05-01

This paper reports on a novel technique for the integration of NiTi shape memory alloy wires and other non-bondable wire materials into silicon-based microelectromechanical system structures using a standard wire-bonding tool. The efficient placement and alignment functions of the wire-bonding tool are used to mechanically attach the wire to deep-etched silicon anchoring and clamping structures. This approach enables a reliable and accurate integration of wire materials that cannot be wire bonded by traditional means.

Microelectromechanical System (MEMS) Gyroscope Noise Analysis and Scale Factor Characterization over Temperature Variation

DTIC Science & Technology

2016-07-01

bias and scale factor tests. By testing state-of-the-art gyroscopes, the effect of input rate stability and accuracy may be examined. Based on the...tumble test or bias analysis at a tilted position to remove the effect of Earth’s rotation in the scale factor test • A rate table with better rate...format guide and test procedure for coriolis vibratory gyros. Piscataway (NJ): IEEE; 2004 Dec. 3. Maio A, Smith G, Knight R, Nothwang W, Conroy J

Micro-Raman Analysis of Irradiated Diamond Films

NASA Technical Reports Server (NTRS)

Newton, R. L.; Munafo, Paul M. (Technical Monitor)

2002-01-01

Owing to its unique and robust physical properties, diamond is a much sought after material for use in advanced technologies such as Microelectromechanical Systems (MEMS). The volume and weight savings promised by MEMS-based devices are of particular interest to spaceflight applications. However, much basic materials science research remains to be completed in this field. Results of micro-Raman analysis of proton (1015 - 1017 H+/cm2 doses) irradiated chemical vapor deposited (CVD) diamond reveals that the microstructure is retained even after high radiation exposure.

Structure and Fabrication of a Microscale Flow-Rate/Skin Friction Sensor

NASA Technical Reports Server (NTRS)

Chandrasekharan, Vijay (Inventor); Sells, Jeremy (Inventor); Sheplak, Mark (Inventor); Arnold, David P. (Inventor)

2014-01-01

A floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection.

Liquid Tunable Microlenses based on MEMS techniques

PubMed Central

Zeng, Xuefeng; Jiang, Hongrui

2013-01-01

The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

Optimized piranha etching process for SU8-based MEMS and MOEMS construction

PubMed Central

Holmes, Matthew; Keeley, Jared; Hurd, Katherine; Schmidt, Holger; Hawkins, Aaron

2011-01-01

We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H2O2:H2SO4) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO2 and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides. PMID:21423840

Optimized piranha etching process for SU8-based MEMS and MOEMS construction.

PubMed

Holmes, Matthew; Keeley, Jared; Hurd, Katherine; Schmidt, Holger; Hawkins, Aaron

2010-11-01

We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H(2)O(2):H(2)SO(4)) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO(2) and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.

Optimized piranha etching process for SU8-based MEMS and MOEMS construction

NASA Astrophysics Data System (ADS)

Holmes, Matthew; Keeley, Jared; Hurd, Katherine; Schmidt, Holger; Hawkins, Aaron

2010-11-01

We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H2O2:H2SO4) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO2 and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.

Automated alignment system for optical wireless communication systems using image recognition.

PubMed

Brandl, Paul; Weiss, Alexander; Zimmermann, Horst

2014-07-01

In this Letter, we describe the realization of a tracked line-of-sight optical wireless communication system for indoor data distribution. We built a laser-based transmitter with adaptive focus and ray steering by a microelectromechanical systems mirror. To execute the alignment procedure, we used a CMOS image sensor at the transmitter side and developed an algorithm for image recognition to localize the receiver's position. The receiver is based on a self-developed optoelectronic integrated chip with low requirements on the receiver optics to make the system economically attractive. With this system, we were able to set up the communication link automatically without any back channel and to perform error-free (bit error rate <10⁻⁹) data transmission over a distance of 3.5 m with a data rate of 3 Gbit/s.

Fast and high resolution thermal detector based on an aluminum nitride piezoelectric microelectromechanical resonator with an integrated suspended heat absorbing element

NASA Astrophysics Data System (ADS)

Hui, Yu; Rinaldi, Matteo

2013-03-01

This letter presents a miniaturized, fast, and high resolution thermal detector, in which a heat absorbing element and a temperature sensitive microelectromechanical system (MEMS) resonator are perfectly overlapped but separated by a microscale air gap. This unique design guarantees efficient and fast (˜10s μs) heat transfer from the absorbing element to the temperature sensitive device and enables high resolution thermal power detection (˜nW), thanks to the low noise performance of the high quality factor (Q = 2305) MEMS resonant thermal detector. A device prototype was fabricated, and its detection capabilities were experimentally characterized. A thermal power as low as 150 nW was experimentally measured, and a noise equivalent power of 6.5 nW/Hz1/2 was extracted. A device thermal time constant of only 350 μs was measured (smallest ever reported for MEMS resonant thermal detectors), indicating the great potential of the proposed technology for the implementation of ultra-fast and high resolution un-cooled resonant thermal detectors.

Microelectromechanical accelerometer with resonance-cancelling control circuit including an idle state

DOEpatents

Chu, Dahlon D.; Thelen, Jr., Donald C.; Campbell, David V.

2001-01-01

A digital feedback control circuit is disclosed for use in an accelerometer (e.g. a microelectromechanical accelerometer). The digital feedback control circuit, which periodically re-centers a proof mass in response to a sensed acceleration, is based on a sigma-delta (.SIGMA..DELTA.) configuration that includes a notch filter (e.g. a digital switched-capacitor filter) for rejecting signals due to mechanical resonances of the proof mass and further includes a comparator (e.g. a three-level comparator). The comparator generates one of three possible feedback states, with two of the feedback states acting to re-center the proof mass when that is needed, and with a third feedback state being an "idle" state which does not act to move the proof mass when no re-centering is needed. Additionally, the digital feedback control system includes an auto-zero trim capability for calibration of the accelerometer for accurate sensing of acceleration. The digital feedback control circuit can be fabricated using complementary metal-oxide semiconductor (CMOS) technology, bi-CMOS technology or bipolar technology and used in single- and dual-proof-mass accelerometers.

Diffusion Bonding of Silicon Carbide for a Micro-Electro-Mechanical Systems Lean Direct Injector

NASA Technical Reports Server (NTRS)

Halbig, Michael C.; Singh, Mrityunjay; Shpargel, Tarah P.; Kiser, James D.

2006-01-01

Robust approaches for joining silicon carbide (SiC) to silicon carbide sub-elements have been developed for a micro-electro-mechanical systems lean direct injector (MEMS LDI) application. The objective is to join SiC sub-elements to form a leak-free injector that has complex internal passages for the flow and mixing of fuel and air. Previous bonding technology relied upon silicate glass interlayers that were not uniform or leak free. In a newly developed joining approach, titanium foils and physically vapor deposited titanium coatings were used to form diffusion bonds between SiC materials during hot pressing. Microscopy results show the formation of well adhered diffusion bonds. Initial tests show that the bond strength is much higher than required for the component system. Benefits of the joining technology are fabrication of leak free joints with high temperature and mechanical capability.

Microcantilever sensor platform for UGV-based detection

NASA Astrophysics Data System (ADS)

Lawrence, Tyson T.; Halleck, A. E.; Schuler, Peter S.; Mahmud, K. K.; Hicks, David R.

2010-04-01

The increased use of Unmanned Ground Vehicles (UGVs) drives the need for new lightweight, low cost sensors. Microelectromechanical System (MEMS) based microcantilever sensors are a promising technology to meet this need, because they can be manufactured at low cost on a mass scale, and are easily integrated into a UGV platform for detection of explosives and other threat agents. While the technology is extremely sensitive, selectivity is a major challenge and the response modes are not well understood. This work summarizes advances in characterizing ultrasensitive microcantilever responses, sampling considerations, and sensor design and cantilever coating methodologies consistent with UGV point detector needs.

GaAs-based resonant tunneling diode (RTD) epitaxy on Si for highly sensitive strain gauge applications

PubMed Central

2013-01-01

As a highly sensitive strain gauge element, GaAs-based resonant tunneling diode (RTD) has already been applied in microelectromechanical system (MEMS) sensors. Due to poor mechanical properties and high cost, GaAs-based material has been limited in applications as the substrate for MEMS. In this work, we present a method to fabricate the GaAs-based RTD on Si substrate. From the experimental results, it can be concluded that the piezoresistive coefficient achieved with this method reached 3.42 × 10−9 m2/N, which is about an order of magnitude higher than the Si-based semiconductor piezoresistors. PMID:23651496

AlN based piezoelectric micromirror.

PubMed

Shao, Jian; Li, Qi; Feng, Chuhuan; Li, Wei; Yu, Hongbin

2018-03-01

Aiming to pursue a micromirror possessing many desired characteristics, such as linear control, low power consumption, fast response, and easy fabrication, a new piezoelectric actuation strategy is presented. Different from conventional piezoelectric actuation cases, we first propose using AlN film as the active layer for actuating the micromirror. Owing to its good CMOS compatible deposition and patterning techniques, the AlN based piezoelectric micromirror has been successfully fabricated with a modified silicon-on-insulator-based microelectromechanical system (MEMS) process. At the same time, various mirror movement modes operating at high frequencies and excellent linear relationship between the movement and the control signal both have been experimentally demonstrated.

78 FR 59916 - Application(s) for Duty-Free Entry of Scientific Instruments

Federal Register 2010, 2011, 2012, 2013, 2014

2013-09-30

... Minnesota, Dept. of Chemical Engineering & Material Science, 421 Washington Avenue SE, Minneapolis, MN 55455... microelectronics, micro-electromechanical systems (MEMS) as well as nanotechnology materials and devices...

DARPA looks beyond GPS for positioning, navigating, and timing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kramer, David

Cold-atom interferometry, microelectromechanical systems, signals of opportunity, and atomic clocks are some of the technologies the defense agency is pursuing to provide precise navigation when GPS is unavailable.

State Estimation for Humanoid Robots

DTIC Science & Technology

2015-07-01

21 2.2.1 Linear Inverted Pendulum Model . . . . . . . . . . . . . . . . . . . 21 2.2.2 Planar Five-link Model...Linear Inverted Pendulum Model. LVDT Linear Variable Differential Transformers. MEMS Microelectromechanical Systems. MHE Moving Horizon Estimator. QP...

Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS)

DTIC Science & Technology

2003-07-01

micromachining techniques were investigated. Surface micromachining techniques include deposition of thin and thick polymer films using vacuum and spin ...1 2.0 Introduction ...100 4.3.1 Nozzle-diffuser pumps theory

Human Location Detection System Using Micro-Electromechanical Sensor for Intelligent Fan

NASA Astrophysics Data System (ADS)

Parnin, S.; Rahman, M. M.

2017-03-01

This paper presented the development of sensory system for detection of both the presence and the location of human in a room spaces using MEMS Thermal sensor. The system is able to detect the surface temperature of occupants by a non-contact detection at the maximum of 6 meters far. It can be integrated to any swing type of electrical appliances such as standing fan or a similar devices. Differentiating human from other moving and or static object by heat variable is nearly impossible since human, animals and electrical appliances produce heat. The uncontrollable heat properties which can change and transfer will add to the detection issue. Integrating the low cost MEMS based thermal sensor can solve the first of human sensing problem by its ability to detect human in stationary. Further discrimination and analysis must therefore be made to the measured temperature data to distinguish human from other objects. In this project, the fan is properly designed and program in such a way that it can adapt to different events starting from the human sensing stage to its dynamic and mechanical moving parts. Up to this stage initial testing to the Omron D6T microelectromechanical thermal sensor is currently under several experimental stages. Experimental result of the sensor tested on stationary and motion state of human are behaviorally differentiable and successfully locate the human position by detecting the maximum temperature of each sensor reading.

Development of a wireless MEMS multifunction sensor system and field demonstration of embedded sensors for monitoring concrete pavements, volume II

DOT National Transportation Integrated Search

2016-08-01

This two-pronged study evaluated the performance of commercial off-the-shelf (COTS) micro-electromechanical sensors and systems (MEMS) embedded in concrete pavement (Final Report Volume I) and developed a wireless MEMS multifunctional sensor system f...

Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation

DOEpatents

Allen, James J.; Sinclair, Michael B.; Dohner, Jeffrey L.

2005-11-22

A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

Upcoming Methods and Specifications of Continuous Intraocular Pressure Monitoring Systems for Glaucoma

PubMed Central

Molaei, Amir; Karamzadeh, Vahid; Safi, Sare; Esfandiari, Hamed; Dargahi, Javad; Khosravi, Mohammad Azam

2018-01-01

Glaucoma is the leading cause of irreversible blindness and vision loss in the world. Although intraocular pressure (IOP) is no longer considered the only risk factor for glaucoma, it is still the most important one. In most cases, high IOP is secondary to trabecular meshwork dysfunction. High IOP leads to compaction of the lamina cribrosa and subsequent damage to retinal ganglion cell axons. Damage to the optic nerve head is evident on funduscopy as posterior bowing of the lamina cribrosa and increased cupping. Currently, the only documented method to slow or halt the progression of this disease is to decrease the IOP; hence, accurate IOP measurement is crucial not only for diagnosis, but also for the management. Due to the dynamic nature and fluctuation of the IOP, a single clinical measurement is not a reliable indicator of diurnal IOP; it requires 24-hour monitoring methods. Technological advances in microelectromechanical systems and microfluidics provide a promising solution for the effective measurement of IOP. This paper provides a broad overview of the upcoming technologies to be used for continuous IOP monitoring. PMID:29403593

Attitude algorithm and initial alignment method for SINS applied in short-range aircraft

NASA Astrophysics Data System (ADS)

Zhang, Rong-Hui; He, Zhao-Cheng; You, Feng; Chen, Bo

2017-07-01

This paper presents an attitude solution algorithm based on the Micro-Electro-Mechanical System and quaternion method. We completed the numerical calculation and engineering practice by adopting fourth-order Runge-Kutta algorithm in the digital signal processor. The state space mathematical model of initial alignment in static base was established, and the initial alignment method based on Kalman filter was proposed. Based on the hardware in the loop simulation platform, the short-range flight simulation test and the actual flight test were carried out. The results show that the error of pitch, yaw and roll angle is fast convergent, and the fitting rate between flight simulation and flight test is more than 85%.

Vision sensor and dual MEMS gyroscope integrated system for attitude determination on moving base

NASA Astrophysics Data System (ADS)

Guo, Xiaoting; Sun, Changku; Wang, Peng; Huang, Lu

2018-01-01

To determine the relative attitude between the objects on a moving base and the base reference system by a MEMS (Micro-Electro-Mechanical Systems) gyroscope, the motion information of the base is redundant, which must be removed from the gyroscope. Our strategy is to add an auxiliary gyroscope attached to the reference system. The master gyroscope is to sense the total motion, and the auxiliary gyroscope is to sense the motion of the moving base. By a generalized difference method, relative attitude in a non-inertial frame can be determined by dual gyroscopes. With the vision sensor suppressing accumulative drift of the MEMS gyroscope, the vision and dual MEMS gyroscope integration system is formed. Coordinate system definitions and spatial transform are executed in order to fuse inertial and visual data from different coordinate systems together. And a nonlinear filter algorithm, Cubature Kalman filter, is used to fuse slow visual data and fast inertial data together. A practical experimental setup is built up and used to validate feasibility and effectiveness of our proposed attitude determination system in the non-inertial frame on the moving base.

Mechanical Behavior of Microelectromechanical Microshutters

NASA Technical Reports Server (NTRS)

Burns, Devin Edward; Jones, Justin Scott; Li, Mary J.

2014-01-01

A custom micro-mechanical test system was constructed using off-the-shelf components to characterize the mechanical properties of microshutters. Microshutters are rectangular microelectromechanical apertures which open and close about a narrow torsion bar hinge. Displacement measurements were verified using both capacitive and digital image correlation techniques. Repeatable experiments on Si3N4 cantilever beams verified that the test system operates consistently. Using beam theory, the modulus of elasticity of the low stress Si3N4 was approximately 150 GPa, though significant uncertainty exists for this measurement due primarily to imprecise knowledge of the cantilever thickness. Tests conducted on microshutter arrays concluded that reducing the Si3N4 thickness from 250 nm to 500 nm reduces the torsional stiffness by a factor of approximately four. This is in good agreement with analytical and finite element models of the microshutters.

Surface micromachined MEMS deformable mirror based on hexagonal parallel-plate electrostatic actuator

NASA Astrophysics Data System (ADS)

Ma, Wenying; Ma, Changwei; Wang, Weimin

2018-03-01

Deformable mirrors (DM) based on microelectromechanical system (MEMS) technology are being applied in adaptive optics (AO) system for astronomical telescopes and human eyes more and more. In this paper a MEMS DM with hexagonal actuator is proposed and designed. The relationship between structural design and performance parameters, mainly actuator coupling, is analyzed carefully and calculated. The optimum value of actuator coupling is obtained. A 7-element DM prototype is fabricated using a commercial available standard three-layer polysilicon surface multi-user-MEMS-processes (PolyMUMPs). Some key performances, including surface figure and voltage-displacement curve, are measured through a 3D white light profiler. The measured performances are very consistent with the theoretical values. The proposed DM will benefit the miniaturization of AO systems and lower their cost.

Embedded Data Acquisition Tools for Rotorcraft Diagnostic Sensors

NASA Technical Reports Server (NTRS)

Wagoner, Robert

2014-01-01

Rotorcraft drive trains must withstand enormous pressure while operating continuously in extreme temperature and vibration environments. Captive components, such as planetary and spiral bevel gears, see enormous strain but are not accessible to fixed instrumentation, such as a piezoelectric transducer. Thus, it is difficult to directly monitor components that are most susceptible to damage. This innovation is a self-contained data processing unit within a specialized fixture that installs directly inside the rotating pinion gear in the gearbox. From this location, it detects and transmits high-resolution prognostic data to a fixed transceiver. The sensor is based on microelectromechanical systems (MEMS) technology and uses innovative circuit designs to capture high-bandwidth data and transmit it wirelessly from inside an operational helicopter transmission. With Ridgetop's advanced MEMS-based sensor, researchers have, for the first time, been able to extract high-resolution acoustic signatures wirelessly from sensors within the transmission that would otherwise be muffled by background gear noises. Ridgetop's innovative instrument will help researchers perform dynamic analysis of gear interaction and develop improved designs for gear components. In addition, data from this instrument can be used to validate new algorithms that detect and predict faults based on external acoustic signatures, for prognostic purposes. The result of this work will be an improvement in safety, performance, and cost for future generations of rotating components.

Reliability Modeling of Microelectromechanical Systems Using Neural Networks

NASA Technical Reports Server (NTRS)

Perera. J. Sebastian

2000-01-01

Microelectromechanical systems (MEMS) are a broad and rapidly expanding field that is currently receiving a great deal of attention because of the potential to significantly improve the ability to sense, analyze, and control a variety of processes, such as heating and ventilation systems, automobiles, medicine, aeronautical flight, military surveillance, weather forecasting, and space exploration. MEMS are very small and are a blend of electrical and mechanical components, with electrical and mechanical systems on one chip. This research establishes reliability estimation and prediction for MEMS devices at the conceptual design phase using neural networks. At the conceptual design phase, before devices are built and tested, traditional methods of quantifying reliability are inadequate because the device is not in existence and cannot be tested to establish the reliability distributions. A novel approach using neural networks is created to predict the overall reliability of a MEMS device based on its components and each component's attributes. The methodology begins with collecting attribute data (fabrication process, physical specifications, operating environment, property characteristics, packaging, etc.) and reliability data for many types of microengines. The data are partitioned into training data (the majority) and validation data (the remainder). A neural network is applied to the training data (both attribute and reliability); the attributes become the system inputs and reliability data (cycles to failure), the system output. After the neural network is trained with sufficient data. the validation data are used to verify the neural networks provided accurate reliability estimates. Now, the reliability of a new proposed MEMS device can be estimated by using the appropriate trained neural networks developed in this work.

A fast MEMS scanning photoacoustic microscopy system and its application in glioma study

NASA Astrophysics Data System (ADS)

Bi, Renzhe; Balasundaram, Ghayathri; Jeon, Seungwan; Pu, Yang; Tay, Hui Chien; Kim, Chulhong; Olivo, Malini

2018-02-01

We present a water-proof Microelectromechanical systems (MEMS) based scanning optical resolution Photoacoustic Microscopy (OR-PAM) system and its application in glioma tumor mouse model study. The presented OR-PAM system has high optical resolution ( 3 μm) and high scanning speed (up to 50 kHz A-scan rate), which is ideal for cerebral vascular imaging. In this study, the mice with glioma tumor are treated with vascular disrupting agent (VDA). OR-PAM system is utilized to image the cerebral with the whole skull intact before and after the injection of VDA. By image registration, the response of every single blood vessel can be traced. This will provide us deeper understanding of the drug effect.

Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)

NASA Astrophysics Data System (ADS)

Birkholz, M.; Ehwald, K.-E.; Basmer, T.; Kulse, P.; Reich, C.; Drews, J.; Genschow, D.; Haak, U.; Marschmeyer, S.; Matthus, E.; Schulz, K.; Wolansky, D.; Winkler, W.; Guschauski, T.; Ehwald, R.

2013-06-01

The progressive scaling in semiconductor technology allows for advanced miniaturization of intelligent systems like implantable biosensors for low-molecular weight analytes. A most relevant application would be the monitoring of glucose in diabetic patients, since no commercial solution is available yet for the continuous and drift-free monitoring of blood sugar levels. We report on a biosensor chip that operates via the binding competition of glucose and dextran to concanavalin A. The sensor is prepared as a fully embedded micro-electromechanical system and operates at GHz frequencies. Glucose concentrations derive from the assay viscosity as determined by the deflection of a 50 nm TiN actuator beam excited by quasi-electrostatic attraction. The GHz detection scheme does not rely on the resonant oscillation of the actuator and safely operates in fluidic environments. This property favorably combines with additional characteristics—(i) measurement times of less than a second, (ii) usage of biocompatible TiN for bio-milieu exposed parts, and (iii) small volume of less than 1 mm3—to qualify the sensor chip as key component in a continuous glucose monitor for the interstitial tissue.

Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman—Nath diffraction

NASA Astrophysics Data System (ADS)

Zuwei, Zhang; Zhiyu, Wen; Jing, Hu

2012-04-01

The design and simulation of a novel microoptoelectromechanical system (MOEMS) accelerometer based on Raman—Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fundamental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.

Micro-Raman Analysis of Irradiated Diamond Films

NASA Technical Reports Server (NTRS)

Newton, Robert L.

2003-01-01

Owing to its unique and robust physical properties, diamond is a much sought after material for use in advanced technologies, even in Microelectromechanical Systems (MEMS). The volume and weight savings promised by MEMS-based devices are of particular interest to spaceflight applications. However, much basic materials science research remains to be completed in this field. Results of micro-Raman analysis of proton (10(exp 15) - 10(exp 17) H(+)/sq cm doses) irradiated chemical vapor deposited (CVD) films are presented and indicate that their microstructure is retained even after high radiation exposure.

Micro-Scale Avionics Thermal Management

NASA Technical Reports Server (NTRS)

Moran, Matthew E.

2001-01-01

Trends in the thermal management of avionics and commercial ground-based microelectronics are converging, and facing the same dilemma: a shortfall in technology to meet near-term maximum junction temperature and package power projections. Micro-scale devices hold the key to significant advances in thermal management, particularly micro-refrigerators/coolers that can drive cooling temperatures below ambient. A microelectromechanical system (MEMS) Stirling cooler is currently under development at the NASA Glenn Research Center to meet this challenge with predicted efficiencies that are an order of magnitude better than current and future thermoelectric coolers.

System for generating two-dimensional masks from a three-dimensional model using topological analysis

DOEpatents

Schiek, Richard [Albuquerque, NM

2006-06-20

A method of generating two-dimensional masks from a three-dimensional model comprises providing a three-dimensional model representing a micro-electro-mechanical structure for manufacture and a description of process mask requirements, reducing the three-dimensional model to a topological description of unique cross sections, and selecting candidate masks from the unique cross sections and the cross section topology. The method further can comprise reconciling the candidate masks based on the process mask requirements description to produce two-dimensional process masks.

Large-field-of-view, modular, stabilized, adaptive-optics-based scanning laser ophthalmoscope.

PubMed

Burns, Stephen A; Tumbar, Remy; Elsner, Ann E; Ferguson, Daniel; Hammer, Daniel X

2007-05-01

We describe the design and performance of an adaptive optics retinal imager that is optimized for use during dynamic correction for eye movements. The system incorporates a retinal tracker and stabilizer, a wide-field line scan scanning laser ophthalmoscope (SLO), and a high-resolution microelectromechanical-systems-based adaptive optics SLO. The detection system incorporates selection and positioning of confocal apertures, allowing measurement of images arising from different portions of the double pass retinal point-spread function (psf). System performance was excellent. The adaptive optics increased the brightness and contrast for small confocal apertures by more than 2x and decreased the brightness of images obtained with displaced apertures, confirming the ability of the adaptive optics system to improve the psf. The retinal image was stabilized to within 18 microm 90% of the time. Stabilization was sufficient for cross-correlation techniques to automatically align the images.

Microfabricated Chemical Sensors for Safety and Emission Control Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Neudeck, P. G.; Chen, L.-Y.; Knight, D.; Liu, C. C.; Wu, Q. H.

1998-01-01

Chemical sensor technology is being developed for leak detection, emission monitoring, and fire safety applications. The development of these sensors is based on progress in two types of technology: 1) Micromachining and microfabrication (MicroElectroMechanical Systems (MEMS)-based) technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Using these technologies, sensors to measure hydrogen, hydrocarbons, nitrogen oxides, carbon monoxide, oxygen, and carbon dioxide are being developed. A description is given of each sensor type and its present stage of development. It is concluded that microfabricated sensor technology has significant potential for use in a range of aerospace applications.

Approaches to automated protein crystal harvesting

DOE Office of Scientific and Technical Information (OSTI.GOV)

Deller, Marc C., E-mail: mdeller@scripps.edu; Rupp, Bernhard, E-mail: mdeller@scripps.edu

Approaches to automated and robot-assisted harvesting of protein crystals are critically reviewed. While no true turn-key solutions for automation of protein crystal harvesting are currently available, systems incorporating advanced robotics and micro-electromechanical systems represent exciting developments with the potential to revolutionize the way in which protein crystals are harvested.

A MEMS-based super fast dew point hygrometer—construction and medical applications

NASA Astrophysics Data System (ADS)

Jachowicz, Ryszard S.; Weremczuk, Jerzy; Paczesny, Daniel; Tarapata, Grzegorz

2009-12-01

The paper shows how MEMS (micro-electro-mechanical system) technology and a modified principle of fast temperature control (by heat injection instead of careful control of cooling) can considerably improve the dynamic parameters of dew point hygrometers. Some aspects of MEMS-type integrated sensor construction and technology, whole measurement system design, the control algorithm to run the system as well as empirical dynamic parameters from the tests are discussed too. The hygrometer can easily obtain five to six measurements per second with an uncertainty of less than 0.3 K. The meter range is between -10 °C and 40 °C dew point. In the second part of the paper (section 2), two different successful applications in medicine based on fast humidity measurements have been discussed. Some specific constructions of these super fast dew point hygrometers based on a MEMS sensor as well as limited empirical results from clinical tests have been reported too.

Heat transfer implications in the first MEMS fabricated thermal transiration-driven vacuum pump for gases

NASA Technical Reports Server (NTRS)

Vargo, S. E.; Green, A. A.; Muntz, E. P.

2000-01-01

The success of NASA's future space missions and the development of portable, commercial instrument packages will depend greatly on miniaturized components enabled by the use of microelectromechanical systems (MEMS).

Fabrication system, method and apparatus for microelectromechanical devices

NASA Technical Reports Server (NTRS)

Johnson, A. David (Inventor); Busta, Heinz H. (Inventor); Nowicki, Ronald S. (Inventor)

1999-01-01

A fabrication system and method of fabrication for producing microelectromechanical devices such as field-effect displays using thin-film technology. A spacer is carried at its proximal end on the surface of a substrate having field-effect emitters with the spacer being enabled for tilting movement from a nested position to a deployed position which is orthogonal to the plane of the substrate. An actuator is formed with one end connected with the substrate and another end connected with spacer. The actuator is made of a shape memory alloy material which contracts when heated through the material's phase-change transition temperature. Contraction of the actuator exerts a pulling force on the spacer which is tilted to the deployed position. A plurality of the spacers are distributed over the area of the display. A glass plate having a phosphor-coated surface is fitted over the distal ends of the deployed spacer.

Thermodynamic analysis of solid-fuel mixtures glycidyl azide polymer (GAP)/RDX for miniengines of microelectromechanical systems

NASA Astrophysics Data System (ADS)

Fut'ko, S. I.; Ermolaeva, E. M.; Dobrego, K. V.; Bondarenko, V. P.; Dolgii, L. N.

2011-09-01

On the basis of thermodynamic calculations we show that solid-fuel mixtures glycidyl azide polymer/RDX are promising for use in miniengines made on the basis of technologies of microelectromechanical systems of semiconductor microelectronics. It has been shown that small (up to 20 mass percent) additives of RDX to the glycidyl azide polymer markedly increase the values of the theoretical specific impulse and the thermal efficiency of the engine and decrease the quantity of undesirable solid carbon formed in combustion products of the mixed fuel. In so doing, these mixtures provide fairly low combustion temperatures not exceeding the thermostability limit of crystal silicon from which the miniengine case is made. The physicochemical factors influencing the value of the theoretical specific impulse of the mixed solid-fuel charge have been elucidated, and methods for its maximization have been proposed.

Apparatus and method for sensing motion in a microelectro-mechanical system

DOEpatents

Dickey, Fred M.; Holswade, Scott C.

1999-01-01

An apparatus and method are disclosed for optically sensing motion in a microelectromechanical system (also termed a MEMS device) formed by surface micromachining or LIGA. The apparatus operates by reflecting or scattering a light beam off a corrugated surface (e.g. gear teeth or a reference feature) of a moveable member (e.g. a gear, rack or linkage) within the MEMS device and detecting the reflected or scattered light. The apparatus can be used to characterize a MEMS device, measuring one or more performance characteristic such as spring and damping coefficients, torque and friction, or uniformity of motion of the moveable member. The apparatus can also be used to determine the direction and extent of motion of the moveable member; or to determine a particular mechanical state that a MEMS device is in. Finally, the apparatus and method can be used for providing feedback to the MEMS device to improve performance and reliability.

Nomarski imaging interferometry to measure the displacement field of micro-electro-mechanical systems

DOE Office of Scientific and Technical Information (OSTI.GOV)

Amiot, Fabien; Roger, Jean Paul

2006-10-20

We propose to use a Nomarski imaging interferometer to measure the out-of-plane displacement field of micro-electro-mechanical systems. It is shown that the measured optical phase arises from both height and slope gradients. By using four integrating buckets, a more efficient approach to unwrap the measured phase is presented,thus making the method well suited for highly curved objects. Slope and height effects are then decoupled by expanding the displacement field on a functions basis, and the inverse transformation is applied to get a displacement field from a measured optical phase map change with a mechanical loading. A measurement reproducibility of approximatelymore » 10 pm is achieved, and typical results are shown on a microcantilever under thermal actuation, thereby proving the ability of such a setup to provide a reliable full-field kinematic measurement without surface modification.« less

A Step Made Toward Designing Microelectromechanical System (MEMS) Structures With High Reliability

NASA Technical Reports Server (NTRS)

Nemeth, Noel N.

2003-01-01

The mechanical design of microelectromechanical systems-particularly for micropower generation applications-requires the ability to predict the strength capacity of load-carrying components over the service life of the device. These microdevices, which typically are made of brittle materials such as polysilicon, show wide scatter (stochastic behavior) in strength as well as a different average strength for different sized structures (size effect). These behaviors necessitate either costly and time-consuming trial-and-error designs or, more efficiently, the development of a probabilistic design methodology for MEMS. Over the years, the NASA Glenn Research Center s Life Prediction Branch has developed the CARES/Life probabilistic design methodology to predict the reliability of advanced ceramic components. In this study, done in collaboration with Johns Hopkins University, the ability of the CARES/Life code to predict the reliability of polysilicon microsized structures with stress concentrations is successfully demonstrated.

Influence of temperature conditions in outer space on the macrokinetic characteristics of ignition and combustion of the solid-fuel charge of the microthruster of a microelectromechanical system

NASA Astrophysics Data System (ADS)

Futko, S. I.; Bondarenko, V. P.; Dolgii, L. N.

2012-03-01

On the basis of macrokinetic calculations, the influence of the initial temperature on the impulse responses of the processes of ignition and combustion of the solid-fuel charge of the microelectromechanical system (MEMS) microthruster burning the solid fuel glycidyl azide polymer (GAP)/RDX has been investigated. It has been established that fuel heating/cooling in a wide range of temperature values from 150 to 450 K characteristic of the conditions of a satellite in orbital flight markedly affects both the thrust and the total impulse of the MEMS microthruster. In so doing, an increase in the initial temperature leads to a marked decrease in the induction period and an increase in the critical flux of fuel ignition. The influence of the change in the initial temperature on the self-ignition temperature of GAP can be neglected. To obtain stable characteristics of the microthruster, it seems expedient to use a thermostating system.

A microelectromechanical systems (MEMS) force-displacement transducer for sub-5 nm nanoindentation and adhesion measurements

NASA Astrophysics Data System (ADS)

Zhang, Youfeng; Oh, Yunje; Stauffer, Douglas; Polycarpou, Andreas A.

2018-04-01

We present a highly sensitive force-displacement transducer capable of performing ultra-shallow nanoindentation and adhesion measurements. The transducer utilizes electrostatic actuation and capacitive sensing combined with microelectromechanical fabrication technologies. Air indentation experiments report a root-mean-square (RMS) force resolution of 1.8 nN and an RMS displacement resolution of 0.019 nm. Nanoindentation experiments on a standard fused quartz sample report a practical RMS force resolution of 5 nN and an RMS displacement resolution of 0.05 nm at sub-10 nm indentation depths, indicating that the system has a very low system noise for indentation experiments. The high sensitivity and low noise enables the transducer to obtain high-resolution nanoindentation data at sub-5 nm contact depths. The sensitive force transducer is used to successfully perform nanoindentation measurements on a 14 nm thin film. Adhesion measurements were also performed, clearly capturing the pull-on and pull-off forces during approach and separation of two contacting surfaces.

Millimeter-scale MEMS enabled autonomous systems: system feasibility and mobility

NASA Astrophysics Data System (ADS)

Pulskamp, Jeffrey S.

2012-06-01

Millimeter-scale robotic systems based on highly integrated microelectronics and micro-electromechanical systems (MEMS) could offer unique benefits and attributes for small-scale autonomous systems. This extreme scale for robotics will naturally constrain the realizable system capabilities significantly. This paper assesses the feasibility of developing such systems by defining the fundamental design trade spaces between component design variables and system level performance parameters. This permits the development of mobility enabling component technologies within a system relevant context. Feasible ranges of system mass, required aerodynamic power, available battery power, load supported power, flight endurance, and required leg load bearing capability are presented for millimeter-scale platforms. The analysis illustrates the feasibility of developing both flight capable and ground mobile millimeter-scale autonomous systems while highlighting the significant challenges that must be overcome to realize their potential.

Development of a new sensor based on micro-electro-mechanical systems for objective in vivo measurement of the cutaneous temperature: application to foundations.

PubMed

Korichi, Rodolphe; Mac-Mary, Sophie; Elkhyat, Ahmed; Sainthillier, Jean-Marie; Ränsch, Pascal; Humbert, Philippe; Viviant, Eric; Gazano, Germaine; Mahé, Christian

2006-08-01

The purpose of this work was to develop a new sensor for objective in vivo measurement of the cutaneous temperature based on micro-electro-mechanical systems (MEMS), and to compare these performances with those of a classical thermocouple. Research on this new sensor was carried out to allow the quantification of the thermal properties of the made-up skin. Sixteen female subjects divided into two different age groups (18-35 and >50 years old) were recruited for this study. Several zones of the face and forearms were made up at random with foundations containing or not a thermoregulator raw material. The quantity of foundation applied on the skin was standardized and measurements were carried out first before make-up, and then 10 s and 5 min after make-up. The new sensor and the thermocouple were used successively on each zone. The cutaneous temperature was expressed in degrees celsius. The two systems are similar in terms of repeatability and reproducibility, with some differences in sensibility. The data measured by the MEMS sensor appear lower than those measured by the thermocouple. After make-up, the MEMS sensor detects a progressive increase of the temperature in time whereas the thermocouple detects a decrease. We found the same evolution on the face but in a more attenuated way. These results tend to show that the devices do not measure the same phenomenon. The thermocouple appears more sensitive to the thermal response of the made-up surface whereas the MEMS sensor appears more sensitive to the heat transfers in the interface between the skin and make-up.

Superhard self-lubricating AlMgB14 films for microelectromechanical devices

NASA Astrophysics Data System (ADS)

Tian, Y.; Bastawros, A. F.; Lo, C. C. H.; Constant, A. P.; Russell, A. M.; Cook, B. A.

2003-10-01

Performance and reliability of microelectromechanical system (MEMS) components can be enhanced dramatically through the incorporation of protective thin-film coatings. Current-generation MEMS devices prepared by the lithographie-galvanoformung-abformung (LIGA) technique employ transition metals such as Ni, Cu, Fe, or alloys thereof, and hence lack stability in oxidizing, corrosive, and/or high-temperature environments. Fabrication of a superhard self-lubricating coating based on a ternary boride compound AlMgB14 described in this letter has great potential in protective coating technology for LIGA microdevices. Nanoindentation tests show that the hardness of AlMgB14 films prepared by pulsed laser deposition ranges from 45 GPa to 51 GPa, when deposited at room temperature and 573 K, respectively. Extremely low friction coefficients of 0.04-0.05, which are thought to result from a self-lubricating effect, have also been confirmed by nanoscratch tests on the AlMgB14 films. Transmission electron microscopy studies show that the as-deposited films are amorphous, regardless of substrate temperature; however, analysis of Fourier transform infrared spectra suggests that the higher substrate temperature facilitates the formation of the B12 icosahedral framework, therefore leading to the higher hardness.

Micro-electromechanical film bulk acoustic sensor for plasma and whole blood coagulation monitoring.

PubMed

Chen, Da; Song, Shuren; Ma, Jilong; Zhang, Zhen; Wang, Peng; Liu, Weihui; Guo, Qiuquan

2017-05-15

Monitoring blood coagulation is an important issue in the surgeries and the treatment of cardiovascular diseases. In this work, we reported a novel strategy for the blood coagulation monitoring based on a micro-electromechanical film bulk acoustic resonator. The resonator was excited by a lateral electric field and operated under the shear mode with a frequency of 1.9GHz. According to the apparent step-ladder curves of the frequency response to the change of blood viscoelasticity, the coagulation time (prothrombin time) and the coagulation kinetics were measured with the sample consumption of only 1μl. The procoagulant activity of thromboplastin and the anticoagulant effect of heparin on the blood coagulation process were illustrated exemplarily. The measured prothrombin times showed a good linear correlation with R 2 =0.99969 and a consistency with the coefficient of variation less than 5% compared with the commercial coagulometer. The proposed film bulk acoustic sensor, which has the advantages of small size, light weight, low cost, simple operation and little sample consumption, is a promising device for miniaturized, online and automated analytical system for routine diagnostics of hemostatic status and personal health monitoring. Copyright © 2017 Elsevier B.V. All rights reserved.

Collaborative WiFi Fingerprinting Using Sensor-Based Navigation on Smartphones.

PubMed

Zhang, Peng; Zhao, Qile; Li, You; Niu, Xiaoji; Zhuang, Yuan; Liu, Jingnan

2015-07-20

This paper presents a method that trains the WiFi fingerprint database using sensor-based navigation solutions. Since micro-electromechanical systems (MEMS) sensors provide only a short-term accuracy but suffer from the accuracy degradation with time, we restrict the time length of available indoor navigation trajectories, and conduct post-processing to improve the sensor-based navigation solution. Different middle-term navigation trajectories that move in and out of an indoor area are combined to make up the database. Furthermore, we evaluate the effect of WiFi database shifts on WiFi fingerprinting using the database generated by the proposed method. Results show that the fingerprinting errors will not increase linearly according to database (DB) errors in smartphone-based WiFi fingerprinting applications.

Collaborative WiFi Fingerprinting Using Sensor-Based Navigation on Smartphones

PubMed Central

Zhang, Peng; Zhao, Qile; Li, You; Niu, Xiaoji; Zhuang, Yuan; Liu, Jingnan

2015-01-01

This paper presents a method that trains the WiFi fingerprint database using sensor-based navigation solutions. Since micro-electromechanical systems (MEMS) sensors provide only a short-term accuracy but suffer from the accuracy degradation with time, we restrict the time length of available indoor navigation trajectories, and conduct post-processing to improve the sensor-based navigation solution. Different middle-term navigation trajectories that move in and out of an indoor area are combined to make up the database. Furthermore, we evaluate the effect of WiFi database shifts on WiFi fingerprinting using the database generated by the proposed method. Results show that the fingerprinting errors will not increase linearly according to database (DB) errors in smartphone-based WiFi fingerprinting applications. PMID:26205269

Quantum Control of a Nitrogen-Vacancy Center using Surface Acoustic Waves in the Resolved Sideband Limit

NASA Astrophysics Data System (ADS)

Golter, David; Oo, Thein; Amezcua, Maira; Wang, Hailin

Micro-electromechanical systems research is producing increasingly sophisticated tools for nanophononic applications. Such technology is well-suited for achieving chip-based, integrated acoustic control of solid-state quantum systems. We demonstrate such acoustic control in an important solid-state qubit, the diamond nitrogen-vacancy (NV) center. Using an interdigitated transducer to generate a surface acoustic wave (SAW) field in a bulk diamond, we observe phonon-assisted sidebands in the optical excitation spectrum of a single NV center. This exploits the strong strain sensitivity of the NV excited states. The mechanical frequencies far exceed the relevant optical linewidths, reaching the resolved-sideband regime. This enables us to use the SAW field for driving Rabi oscillations on the phonon-assisted optical transition. These results stimulate the further integration of SAW-based technologies with the NV center system.

Models and signal processing for an implanted ethanol bio-sensor.

PubMed

Han, Jae-Joon; Doerschuk, Peter C; Gelfand, Saul B; O'Connor, Sean J

2008-02-01

The understanding of drinking patterns leading to alcoholism has been hindered by an inability to unobtrusively measure ethanol consumption over periods of weeks to months in the community environment. An implantable ethanol sensor is under development using microelectromechanical systems technology. For safety and user acceptability issues, the sensor will be implanted subcutaneously and, therefore, measure peripheral-tissue ethanol concentration. Determining ethanol consumption and kinetics in other compartments from the time course of peripheral-tissue ethanol concentration requires sophisticated signal processing based on detailed descriptions of the relevant physiology. A statistical signal processing system based on detailed models of the physiology and using extended Kalman filtering and dynamic programming tools is described which can estimate the time series of ethanol concentration in blood, liver, and peripheral tissue and the time series of ethanol consumption based on peripheral-tissue ethanol concentration measurements.

Higher-order vibrational mode frequency tuning utilizing fishbone-shaped microelectromechanical systems resonator

NASA Astrophysics Data System (ADS)

Suzuki, Naoya; Tanigawa, Hiroshi; Suzuki, Kenichiro

2013-04-01

Resonators based on microelectromechanical systems (MEMS) have received considerable attention for their applications for wireless equipment. The requirements for this application include small size, high frequency, wide bandwidth and high portability. However, few MEMS resonators with wide-frequency tuning have been reported. A fishbone-shaped resonator has a resonant frequency with a maximum response that can be changed according to the location and number of several exciting electrodes. Therefore, it can be expected to provide wide-frequency tuning. The resonator has three types of electrostatic forces that can be generated to deform a main beam. We evaluate the vibrational modes caused by each exciting electrodes by comparing simulated results with measured ones. We then successfully demonstrate the frequency tuning of the first to fifth resonant modes by using the algorithm we propose here. The resulting frequency tuning covers 178 to 1746 kHz. In addition, we investigate the suppression of the anchor loss to enhance the Q-factor. An experiment shows that tapered-shaped anchors provide a higher Q-factor than rectangular-shaped anchors. The Q-factor of the resonators supported by suspension beams is also discussed. Because the suspension beams cause complicated vibrational modes for higher frequencies, the enhancement of the Q-factor for high vibrational modes cannot be obtained here. At present, the tapered-anchor resonators are thought to be most suitable for frequency tuning applications.

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model.

PubMed

Jang, Jongmoon; Lee, JangWoo; Woo, Seongyong; Sly, David J; Campbell, Luke J; Cho, Jin-Ho; O'Leary, Stephen J; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Jang, Jeong Hun; Choi, Hongsoo

2015-07-31

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

A high bandwidth three-axis out-of-plane motion measurement system based on optical beam deflection

NASA Astrophysics Data System (ADS)

Piyush, P.; Giridhar, M. S.; Jayanth, G. R.

2018-03-01

Multi-axis measurement of motion is indispensable for characterization of dynamic systems and control of motion stages. This paper presents an optical beam deflection-based measurement system to simultaneously measure three-axis out-of-plane motion of both micro- and macro-scale targets. Novel strategies are proposed to calibrate the sensitivities of the measurement system. Subsequently the measurement system is experimentally realized and calibrated. The system is employed to characterize coupled linear and angular motion of a piezo-actuated stage. The measured motion is shown to be in agreement with theoretical expectation. Next, the high bandwidth of the measurement system has been showcased by utilizing it to measure coupled two-axis transient motion of a Radio Frequency Micro-Electro-Mechanical System switch with a rise time of about 60 μs. Finally, the ability of the system to measure out-of-plane angular motion about the second axis has been demonstrated by measuring the deformation of a micro-cantilever beam.

Infusion of Emerging Technologies and New Teaching Methods into the Mechanical Engineering Curriculum at the City College of New York

ERIC Educational Resources Information Center

Delale, Feridun; Liaw, Benjamin M.; Jiji, Latif M.; Voiculescu, Ioana; Yu, Honghui

2011-01-01

From October 2003 to April 2008 a systemic reform of the Mechanical Engineering program at The City College of New York was undertaken with the goal of incorporating emerging technologies (such as nanotechnology, biotechnology, Micro-Electro-Mechanical Systems (MEMS), intelligent systems) and new teaching methodologies (such as project based…

Dynamic metasurface lens based on MEMS technology

NASA Astrophysics Data System (ADS)

Roy, Tapashree; Zhang, Shuyan; Jung, Il Woong; Troccoli, Mariano; Capasso, Federico; Lopez, Daniel

2018-02-01

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, and projection systems.

Replaceable Microfluidic Cartridges for a PCR Biosensor

NASA Technical Reports Server (NTRS)

Francis, Kevin; Sullivan, Ron

2005-01-01

The figure depicts a replaceable microfluidic cartridge that is a component of a miniature biosensor that detects target deoxyribonucleic acid (DNA) sequences. The biosensor utilizes (1) polymerase chain reactions (PCRs) to multiply the amount of DNA to be detected, (2) fluorogenic polynucleotide probe chemicals for labeling the target DNA sequences, and (3) a high-sensitivity epifluorescence-detection optoelectronic subsystem. Microfluidics is a relatively new field of device development in which one applies techniques for fabricating microelectromechanical systems (MEMS) to miniature systems for containing and/or moving fluids. Typically, microfluidic devices are microfabricated, variously, from silicon or polymers. The development of microfluidic devices for applications that involve PCR and fluorescence-based detection of PCR products poses special challenges

Fabrication of polymeric nano-batteries array using anodic aluminum oxide templates.

PubMed

Zhao, Qiang; Cui, Xiaoli; Chen, Ling; Liu, Ling; Sun, Zhenkun; Jiang, Zhiyu

2009-02-01

Rechargeable nano-batteries were fabricated in the array pores of anodic aluminum oxide (AAO) template, combining template method and electrochemical method. The battery consisted of electropolymerized PPy electrode, porous TiO2 separator, and chemically polymerized PAn electrode was fabricated in the array pores of two-step anodizing aluminum oxide (AAO) membrane, based on three-step assembling method. It performs typical electrochemical battery behavior with good charge-discharge ability, and presents a capacity of 25 nAs. AFM results show the hexagonal array of nano-batteries' top side. The nano-battery may be a promising device for the development of Micro-Electro-Mechanical Systems (MEMS), and Nano-Electro-Mechanical Systems (NEMS).

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems.

PubMed

Baranski, Maciej; Bargiel, Sylwester; Passilly, Nicolas; Gorecki, Christophe; Jia, Chenping; Frömel, Jörg; Wiemer, Maik

2015-08-01

This paper presents the optical design of a miniature 3D scanning system, which is fully compatible with the vertical integration technology of micro-opto-electro-mechanical systems (MOEMS). The constraints related to this integration strategy are considered, resulting in a simple three-element micro-optical setup based on an afocal scanning microlens doublet and a focusing microlens, which is tolerant to axial position inaccuracy. The 3D scanning is achieved by axial and lateral displacement of microlenses of the scanning doublet, realized by micro-electro-mechanical systems microactuators (the transmission scanning approach). Optical scanning performance of the system is determined analytically by use of the extended ray transfer matrix method, leading to two different optical configurations, relying either on a ball lens or plano-convex microlenses. The presented system is aimed to be a core component of miniature MOEMS-based optical devices, which require a 3D optical scanning function, e.g., miniature imaging systems (confocal or optical coherence microscopes) or optical tweezers.

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers

PubMed Central

Royo, Guillermo; Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Aldea, Concepción; Celma, Santiago

2016-01-01

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/Hz at 50 kHz, which corresponds to 100 μg/Hz. PMID:28042830

Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers.

PubMed

Royo, Guillermo; Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Aldea, Concepción; Celma, Santiago

2016-12-30

In this work, we present a capacitance-to-voltage converter (CVC) for capacitive accelerometers based on microelectromechanical systems (MEMS). Based on a fully-differential transimpedance amplifier (TIA), it features a 34-dB transimpedance gain control and over one decade programmable bandwidth, from 75 kHz to 1.2 MHz. The TIA is aimed for low-cost low-power capacitive sensor applications. It has been designed in a standard 0.18-μm CMOS technology and its power consumption is only 54 μW. At the maximum transimpedance configuration, the TIA shows an equivalent input noise of 42 fA/ Hz at 50 kHz, which corresponds to 100 μg/ Hz .

A bio-inspired real-time capable artificial lateral line system for freestream flow measurements.

PubMed

Abels, C; Qualtieri, A; De Vittorio, M; Megill, W M; Rizzi, F

2016-06-03

To enhance today's artificial flow sensing capabilities in aerial and underwater robotics, future robots could be equipped with a large number of miniaturized sensors distributed over the surface to provide high resolution measurement of the surrounding fluid flow. In this work we show a linear array of closely separated bio-inspired micro-electro-mechanical flow sensors whose sensing mechanism is based on a piezoresistive strain-gauge along a stress-driven cantilever beam, mimicking the biological superficial neuromasts found in the lateral line organ of fishes. Aiming to improve state-of-the-art flow sensing capability in autonomously flying and swimming robots, our artificial lateral line system was designed and developed to feature multi-parameter freestream flow measurements which provide information about (1) local flow velocities as measured by the signal amplitudes from the individual cantilevers as well as (2) propagation velocity, (3) linear forward/backward direction along the cantilever beam orientation and (4) periodicity of pulses or pulse trains determined by cross-correlating sensor signals. A real-time capable cross-correlation procedure was developed which makes it possible to extract freestream flow direction and velocity information from flow fluctuations. The computed flow velocities deviate from a commercial system by 0.09 m s(-1) at 0.5 m s(-1) and 0.15 m s(-1) at 1.0 m s(-1) flow velocity for a sampling rate of 240 Hz and a sensor distance of 38 mm. Although experiments were performed in air, the presented flow sensing system can be applied to underwater vehicles as well, once the sensors are embedded in a waterproof micro-electro-mechanical systems package.

Integrated microelectromechanical gyroscope under shock loads

NASA Astrophysics Data System (ADS)

Nesterenko, T. G.; Koleda, A. N.; Barbin, E. S.

2018-01-01

The paper presents a new design of a shock-proof two-axis microelectromechanical gyroscope. Without stoppers, the shock load enables the interaction between the silicon sensor elements. Stoppers were installed in the gyroscope to prevent the contact interaction between electrodes and spring elements with fixed part of the sensor. The contact of stoppers occurs along the plane, thereby preventing the system from serious contact stresses. The shock resistance of the gyroscope is improved by the increase in its eigenfrequency at which the contact interaction does not occur. It is shown that the shock load directed along one axis does not virtually cause the movement of sensing elements along the crosswise axes. Maximum stresses observed in the proposed gyroscope at any loading direction do not exceed the value allowable for silicon.

Microelectromechanical safe arm device

DOEpatents

Roesler, Alexander W [Tijeras, NM

2012-06-05

Microelectromechanical (MEM) apparatus and methods for operating, for preventing unintentional detonation of energetic components comprising pyrotechnic and explosive materials, such as air bag deployment systems, munitions and pyrotechnics. The MEM apparatus comprises an interrupting member that can be moved to block (interrupt) or complete (uninterrupt) an explosive train that is part of an energetic component. One or more latching members are provided that engage and prevent the movement of the interrupting member, until the one or more latching members are disengaged from the interrupting member. The MEM apparatus can be utilized as a safe and arm device (SAD) and electronic safe and arm device (ESAD) in preventing unintentional detonations. Methods for operating the MEM apparatus include independently applying drive signals to the actuators coupled to the latching members, and an actuator coupled to the interrupting member.

Towards Automated Nanomanipulation under Scanning Electron Microscopy

NASA Astrophysics Data System (ADS)

Ye, Xutao

Robotic Nanomaterial Manipulation inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing one-dimensional nanomaterial's properties. Conventionally, manipulation of nanowires has been performed via teleoperation, which is time-consuming and highly skill-dependent. Manual manipulation also has the limitation of low success rates and poor reproducibility. This research focuses on a robotic system capable of automated pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system transferred individual silicon nanowires from their growth substrate to a microelectromechanical systems (MEMS) device that characterized the nanowires' electromechanical properties. The performances of the nanorobotic pick-up and placement procedures were quantified by experiments. The system demonstrated automated nanowire pick-up and placement with high reliability. A software system for a load-lock-compatible nanomanipulation system is also designed and developed in this research.

Deformable Mirrors Correct Optical Distortions

NASA Technical Reports Server (NTRS)

2010-01-01

By combining the high sensitivity of space telescopes with revolutionary imaging technologies consisting primarily of adaptive optics, the Terrestrial Planet Finder is slated to have imaging power 100 times greater than the Hubble Space Telescope. To this end, Boston Micromachines Corporation, of Cambridge, Massachusetts, received Small Business Innovation Research (SBIR) contracts from the Jet Propulsion Laboratory for space-based adaptive optical technology. The work resulted in a microelectromechanical systems (MEMS) deformable mirror (DM) called the Kilo-DM. The company now offers a full line of MEMS DMs, which are being used in observatories across the world, in laser communication, and microscopy.

Microfabrication of hybrid fluid membrane for microengines

NASA Astrophysics Data System (ADS)

Chutani, R.; Formosa, F.; de Labachelerie, M.; Badel, A.; Lanzetta, F.

2015-12-01

This paper describes the microfabrication and dynamic characterization of thick membranes providing a technological solution for microengines. The studied membranes are called hybrid fluid-membrane (HFM) and consist of two thin membranes that encapsulate an incompressible fluid. This work details the microelectromechanical system (MEMS) scalable fabrication and characterization of HFMs. The membranes are composite structures based on Silicon spiral springs embedded in a polymer (RTV silicone). The anodic bonding of multiple stacks of Si/glass structures, the fluid filling and the sealing have been demonstrated. Various HFMs were successfully fabricated and their dynamic characterization demonstrates the agreement between experimental and theoretical results.

Printed Antennas Made Reconfigurable by Use of MEMS Switches

NASA Technical Reports Server (NTRS)

Simons, Rainee N.

2005-01-01

A class of reconfigurable microwave antennas now undergoing development comprise fairly conventional printed-circuit feed elements and radiating patches integrated with novel switches containing actuators of the microelectromechanical systems (MEMS) type. In comparison with solid-state electronic control devices incorporated into some prior printed microwave antennas, the MEMS-based switches in these antennas impose lower insertion losses and consume less power. Because the radio-frequency responses of the MEMS switches are more nearly linear, they introduce less signal distortion. In addition, construction and operation are simplified because only a single DC bias line is needed to control each MEMS actuator.

Feasibility Study of Thin Film Thermocouple Piles

NASA Technical Reports Server (NTRS)

Sisk, R. C.

2001-01-01

Historically, thermopile detectors, generators, and refrigerators based on bulk materials have been used to measure temperature, generate power for spacecraft, and cool sensors for scientific investigations. New potential uses of small, low-power, thin film thermopiles are in the area of microelectromechanical systems since power requirements decrease as electrical and mechanical machines shrink in size. In this research activity, thin film thermopile devices are fabricated utilizing radio frequency sputter coating and photoresist lift-off techniques. Electrical characterizations are performed on two designs in order to investigate the feasibility of generating small amounts of power, utilizing any available waste heat as the energy source.

Respiratory Magnetogram Detected with a MEMS Device

PubMed Central

Dominguez-Nicolas, Saul M.; Juarez-Aguirre, Raul; Herrera-May, Agustin L.; Garcia-Ramirez, Pedro; Figueras, Eduard; Gutierrez-D., Edmundo A.; Tapia, Jesus A.; Trejo, Argelia; Manjarrez, Elias

2013-01-01

Magnetic fields generated by the brain or the heart are very useful in clinical diagnostics. Therefore, magnetic signals produced by other organs are also of considerable interest. Here we show first evidence that thoracic muscles can produce a strong magnetic flux density during respiratory activity, that we name respiratory magnetogram. We used a small magnetometer based on microelectromechanical systems (MEMS), which was positioned inside the open thoracic cage of anaesthetized and ventilated rats. With this new MEMS sensor of about 20 nT resolution, we recorded a strong and rhythmic respiratory magnetogram of about 600 nT. PMID:24046516

Inertial Navigation Sensors

DTIC Science & Technology

2010-03-01

Characterization Solutions Enabled by Laser Doppler Vibrometer Measurements, Proc. SPIE, Fifth International Conference on Vibration Measurements by Laser ...commercial capabilities: Ring Laser Gyros, Fiber Optic Gyros, and Micro-Electro-Mechanical Systems (MEMS) gyros and accelerometers. RLGs and FOGs are now...augmentation sensors have been tied into the inertial systems; e.g., GPS, velocity meters, seekers, star trackers, magnetometers, lidar , etc. The

Radio frequency telemetry system for sensors and actuators

NASA Technical Reports Server (NTRS)

Simons, Rainee N. (Inventor); Miranda, Felix A. (Inventor)

2003-01-01

The present invention discloses and teaches apparatus for combining Radio Frequency (RF) technology with novel micro-inductor antennas and signal processing circuits for RF telemetry of real time, measured data, from microelectromechanical system (MEMS) sensors, through electromagnetic coupling with a remote powering/receiving device. Such technology has many applications, but is especially useful in the biomedical area.

The 18 mm[superscript 2] Laboratory: Teaching MEMS Development with the SUMMiT Foundry Process

ERIC Educational Resources Information Center

Dallas, T.; Berg, J. M.; Gale, R. O.

2012-01-01

This paper describes the goals, pedagogical system, and educational outcomes of a three-semester curriculum in microelectromechanical systems (MEMS). The sequence takes engineering students with no formal MEMS training and gives them the skills to participate in cutting-edge MEMS research and development. The evolution of the curriculum from…

Radio Frequency Telemetry System for Sensors and Actuators

NASA Technical Reports Server (NTRS)

Simons, Rainee N. (Inventor); Miranda, Felix A. (Inventor)

2003-01-01

The present invention discloses and teaches apparatus for combining Radio Frequency (RF) technology with novel micro-inductor antennas and signal processing circuits for RF telemetry of real time, measured data, from microelectromechanical system (MEMS) sensors, through electromagnetic coupling with a remote poweringheceiving device. Such technology has many applications, but is especially useful in the biomedical area.

76 FR 13433 - In the Matter of Certain Mems Devices and Products Containing Same; Notice of Commission Decision...

Federal Register 2010, 2011, 2012, 2013, 2014

2011-03-11

... microelectromechanical systems (``MEMS'') devices and products containing the same by reason of infringement of certain... recommendation on remedy and bonding during the period of Presidential review. The ALJ found no section 337... be construed as ``a system that includes a heated chamber,'' is it the contention of Complainant and...

MEMS-based platforms for mechanical manipulation and characterization of cells

NASA Astrophysics Data System (ADS)

Pan, Peng; Wang, Wenhui; Ru, Changhai; Sun, Yu; Liu, Xinyu

2017-12-01

Mechanical manipulation and characterization of single cells are important experimental techniques in biological and medical research. Because of the microscale sizes and highly fragile structures of cells, conventional cell manipulation and characterization techniques are not accurate and/or efficient enough or even cannot meet the more and more demanding needs in different types of cell-based studies. To this end, novel microelectromechanical systems (MEMS)-based technologies have been developed to improve the accuracy, efficiency, and consistency of various cell manipulation and characterization tasks, and enable new types of cell research. This article summarizes existing MEMS-based platforms developed for cell mechanical manipulation and characterization, highlights their specific design considerations making them suitable for their designated tasks, and discuss their advantages and limitations. In closing, an outlook into future trends is also provided.

Mechanical Computing in Microelectromechanical Systems (MEMS)

DTIC Science & Technology

2003-03-01

New York: John Wiley and Sons, Inc., 1968. 25. Helvajian , H . and S. Janson, Microengineering Aerospace Systems, ch. Micro- engineering Space Systems...sacrificial layer. (g)Strip remaining resist. ( h ) Deposit a structural layer(conformal deposition is shown). (i) Deposit resist. (j) Expose resist...layer is then deposited, and assuming a conformal process, the structural layer will follow the topography of the sacrificial layer (Figure 2.9( h

Demonstration of Vibrational Braille Code Display Using Large Displacement Micro-Electro-Mechanical Systems Actuators

NASA Astrophysics Data System (ADS)

Watanabe, Junpei; Ishikawa, Hiroaki; Arouette, Xavier; Matsumoto, Yasuaki; Miki, Norihisa

2012-06-01

In this paper, we present a vibrational Braille code display with large-displacement micro-electro-mechanical systems (MEMS) actuator arrays. Tactile receptors are more sensitive to vibrational stimuli than to static ones. Therefore, when each cell of the Braille code vibrates at optimal frequencies, subjects can recognize the codes more efficiently. We fabricated a vibrational Braille code display that used actuators consisting of piezoelectric actuators and a hydraulic displacement amplification mechanism (HDAM) as cells. The HDAM that encapsulated incompressible liquids in microchambers with two flexible polymer membranes could amplify the displacement of the MEMS actuator. We investigated the voltage required for subjects to recognize Braille codes when each cell, i.e., the large-displacement MEMS actuator, vibrated at various frequencies. Lower voltages were required at vibration frequencies higher than 50 Hz than at vibration frequencies lower than 50 Hz, which verified that the proposed vibrational Braille code display is efficient by successfully exploiting the characteristics of human tactile receptors.

Microelectromechanical system gravimeters as a new tool for gravity imaging.

PubMed

Middlemiss, Richard P; Bramsiepe, Steven G; Douglas, Rebecca; Hild, Stefan; Hough, James; Paul, Douglas J; Samarelli, Antonio; Rowan, Sheila; Hammond, Giles D

2018-05-28

A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone.This article is part of a discussion meeting issue 'The promises of gravitational-wave astronomy'. © 2018 The Author(s).

Microelectromechanical system gravimeters as a new tool for gravity imaging

NASA Astrophysics Data System (ADS)

Middlemiss, Richard P.; Bramsiepe, Steven G.; Douglas, Rebecca; Hild, Stefan; Hough, James; Paul, Douglas J.; Samarelli, Antonio; Rowan, Sheila; Hammond, Giles D.

2018-05-01

A microelectromechanical system (MEMS) gravimeter has been manufactured with a sensitivity of 40 ppb in an integration time of 1 s. This sensor has been used to measure the Earth tides: the elastic deformation of the globe due to tidal forces. No such measurement has been demonstrated before now with a MEMS gravimeter. Since this measurement, the gravimeter has been miniaturized and tested in the field. Measurements of the free-air and Bouguer effects have been demonstrated by monitoring the change in gravitational acceleration measured while going up and down a lift shaft of 20.7 m, and up and down a local hill of 275 m. These tests demonstrate that the device has the potential to be a useful field-portable instrument. The development of an even smaller device is underway, with a total package size similar to that of a smartphone. This article is part of a discussion meeting issue `The promises of gravitational-wave astronomy'.

Fiber-optic beam control systems using microelectromechanical systems

NASA Astrophysics Data System (ADS)

Sumriddetchkajorn, Sarun

This dissertation, for the first time, proposes, studies, and experimentally demonstrated novel fiber-optic beam control systems based on the use of microelectromechanical system (MEMS) technology in which the miniaturized versions of mechanical systems can be obtained. Beam control modules include optical add/drop filters, optical switches, variable photonic delay lines (VPDLs), and variable optical attenuators (VOAs). The optical add/drop filter functions as a multiwavelength optical switch that offers the ability to drop and add a certain number of desired wavelengths at an intermediate location where access to all the propagating optical channels is not required between transmission terminals. The VOA can also be used in networks where stocking and tracking of fixed attenuators is difficult. Other specific applications of the VOA are optical gain equalization and polarization dependent loss and gain compensation required in high data-rate wavelength division multiplexed (WDM) lightwave systems. A VPDL can be used to adjust timing amongst multiwavelength optical signals in order to reduce timing jitter and burst traffic in photonic packet switching and parallel signal processing systems. In this dissertation, a small tilt micromirror device is proposed for the implementation of all fiber-optic beam control modules. In particular, the macro-pixel approach where several micromirrors are used to manipulate the desired optical beam is introduced to realize high speed and fault tolerant beam control modules. To eliminate the need of careful optical alignment, an all fiber-connectorized multiwavelength optical switch structure is presented and experimentally demonstrated by using a fiber-loop mirror concept with polarization control. In addition, liquid crystal (LC) devices are studied and are used to implement a compact retro- reflective 2 x 2 fiber-optic switch. Compared to MEMS- based mirror technology, the LC technology is more sensitive to temperature, thereby inappropriate to deploy in a harsh environment. With the benefit provided by WDM systems, wavelength sensitive fiber-optic beam controllers are proposed, offering wavelength sensitive time delay and amplitude controls that can be applied in several applications ranging from optical communications to high speed parallel signal processing. (Abstract shortened by UMI.)

Two-dimensional (2D) displacement measurement of moving objects using a new MEMS binocular vision system

NASA Astrophysics Data System (ADS)

Di, Si; Lin, Hui; Du, Ruxu

2011-05-01

Displacement measurement of moving objects is one of the most important issues in the field of computer vision. This paper introduces a new binocular vision system (BVS) based on micro-electro-mechanical system (MEMS) technology. The eyes of the system are two microlenses fabricated on a substrate by MEMS technology. The imaging results of two microlenses are collected by one complementary metal-oxide-semiconductor (CMOS) array. An algorithm is developed for computing the displacement. Experimental results show that as long as the object is moving in two-dimensional (2D) space, the system can effectively estimate the 2D displacement without camera calibration. It is also shown that the average error of the displacement measurement is about 3.5% at different object distances ranging from 10 cm to 35 cm. Because of its low cost, small size and simple setting, this new method is particularly suitable for 2D displacement measurement applications such as vision-based electronics assembly and biomedical cell culture.

Microelectromechanical systems (MEMS) sensors based on lead zirconate titanate (PZT) films

NASA Astrophysics Data System (ADS)

Wang, Li-Peng

2001-12-01

In this thesis, modeling, fabrication and testing of microelectromechanical systems (MEMS) accelerometers based on piezoelectric lead zirconate titanate (PZT) films are investigated. Three different types of structures, cantilever beam, trampoline, and annular diaphragm, are studied. It demonstrates the high-performance, miniaturate, mass-production-compatible, and potentially circuitry-integratable piezoelectric-type PZT MEMS devices. Theoretical models of the cantilever-beam and trampoline accelerometers are derived via structural dynamics and the constitutive equations of piezoelectricity. The time-dependent transverse vibration equations, mode shapes, resonant frequencies, and sensitivities of the accelerometers are calculated through the models. Optimization of the silicon and PZT thickness is achieved with considering the effects of the structural dynamics, the material properties, and manufacturability for different accelerometer specifications. This work is the first demonstration of the fabrication of bulk-micromachined accelerometers combining a deep-trench reactive ion etching (DRIE) release strategy and thick piezoelectric PZT films deposited using a sol-gel method. Processing challenges which are overcome included materials compatibility, metallization, processing of thick layers, double-side processing, deep-trench silicon etching, post-etch cleaning and process integration. In addition, the processed PZT films are characterized by dielectric, ferroelectric (polarization electric-field hysteresis), and piezoelectric measurements and no adverse effects are found. Dynamic frequency response and impedance resonance measurements are performed to ascertain the performance of the MEMS accelerometers. The results show high sensitivities and broad frequency ranges of the piezoelectric-type PZT MEMS accelerometers; the sensitivities range from 0.1 to 7.6 pC/g for resonant frequencies ranging from 44.3 kHz to 3.7 kHz. The sensitivities were compared to theoretical values and a reasonable agreement (˜36% difference) is obtained.

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

PubMed Central

Jang, Jongmoon; Lee, JangWoo; Woo, Seongyong; Sly, David J.; Campbell, Luke J.; Cho, Jin-Ho; O’Leary, Stephen J.; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Hun Jang, Jeong; Choi, Hongsoo

2015-01-01

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92–12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs. PMID:26227924

A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model

NASA Astrophysics Data System (ADS)

Jang, Jongmoon; Lee, Jangwoo; Woo, Seongyong; Sly, David J.; Campbell, Luke J.; Cho, Jin-Ho; O'Leary, Stephen J.; Park, Min-Hyun; Han, Sungmin; Choi, Ji-Wong; Hun Jang, Jeong; Choi, Hongsoo

2015-07-01

We proposed a piezoelectric artificial basilar membrane (ABM) composed of a microelectromechanical system cantilever array. The ABM mimics the tonotopy of the cochlea: frequency selectivity and mechanoelectric transduction. The fabricated ABM exhibits a clear tonotopy in an audible frequency range (2.92-12.6 kHz). Also, an animal model was used to verify the characteristics of the ABM as a front end for potential cochlear implant applications. For this, a signal processor was used to convert the piezoelectric output from the ABM to an electrical stimulus for auditory neurons. The electrical stimulus for auditory neurons was delivered through an implanted intra-cochlear electrode array. The amplitude of the electrical stimulus was modulated in the range of 0.15 to 3.5 V with incoming sound pressure levels (SPL) of 70.1 to 94.8 dB SPL. The electrical stimulus was used to elicit an electrically evoked auditory brainstem response (EABR) from deafened guinea pigs. EABRs were successfully measured and their magnitude increased upon application of acoustic stimuli from 75 to 95 dB SPL. The frequency selectivity of the ABM was estimated by measuring the magnitude of EABRs while applying sound pressure at the resonance and off-resonance frequencies of the corresponding cantilever of the selected channel. In this study, we demonstrated a novel piezoelectric ABM and verified its characteristics by measuring EABRs.

MEMS Fabry-Perot sensor interrogated by optical system-on-a-chip for simultaneous pressure and temperature sensing.

PubMed

Pang, Cheng; Bae, Hyungdae; Gupta, Ashwani; Bryden, Kenneth; Yu, Miao

2013-09-23

We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.

Characterization of Intercalated Graphite Fibers for Microelectromechanical Systems (MEMS) Applications

DTIC Science & Technology

2007-03-01

electric charge to drive movement, eg. a micromirror . These two actuator types have different characteristics and apply dif- ferent forces. The thermal...actuators include micromirrors , comb drives, cantilevers and scratch drives. A scratch drive actuator uses an applied square wave voltage to operate, as

Contributions to the initial development of a microelectromechanical loop heat pipe, which is based on coherent porous silicon

NASA Astrophysics Data System (ADS)

Cytrynowicz, Debra G.

The research project itself was the initiation of the development of a planar miniature loop heat pipe based on a capillary wick structure made of coherent porous silicon. Work on this project fell into four main categories, which were component fabrication, test system construction, characterization testing and test data collection, performance analysis and thermal modeling. Component fabrication involved the production of various components for the evaporator. When applicable, these components were to be produced by microelectronic and MEMS or microelectromechanical fabrication techniques. Required work involved analyses and, where necessary, modifications to the wafer processing sequence, the photo-electrochemical etching process, system and controlling computer program to make it more reliable, flexible and efficient. The development of more than one wick production process was also extremely necessary in the event of equipment failure. Work on developing this alternative also involved investigations into various details of the photo-electrochemical etching process itself. Test system construction involved the actual assembly of open and closed loop test systems. Characterization involved developing and administering a series of tests to evaluate the performance of the wicks and test systems. Although there were some indications that the devices were operating according to loop heat pipe theory, they were transient and unstable. Performance analysis involved the construction of a transparent evaporator, which enabled the visual observation of the phenomena, which occurred in the evaporator during operation. It also involved investigating the effect of the quartz wool secondary wick on the operation of the device. Observations made during the visualization study indicated that the capillary and boiling limits were being reached at extremely low values of input power. The work was performed in a collaborative effort between the Biomedical Nanotechnology Research Laboratory at the University of Toledo, the Center for Microelectronics and Sensors and MEMS at the University of Cincinnati and the Thermo-Mechanical Systems Branch of the Power and On-Board Propulsion Division at the John H. Glenn Research Center of the National Aeronautics and Space Administration in Cleveland, Ohio. Work on the project produced six publications, which presented various details on component fabrication, tests system construction and characterization and thermal modeling.

Residual gas analysis device

DOEpatents

Thornberg, Steven M [Peralta, NM

2012-07-31

A system is provided for testing the hermeticity of a package, such as a microelectromechanical systems package containing a sealed gas volume, with a sampling device that has the capability to isolate the package and breach the gas seal connected to a pulse valve that can controllably transmit small volumes down to 2 nanoliters to a gas chamber for analysis using gas chromatography/mass spectroscopy diagnostics.

Enhanced infra-red emission from sub-millimeter microelectromechanical systems micro hotplates via inkjet deposited carbon nanoparticles and fullerenes

NASA Astrophysics Data System (ADS)

De Luca, A.; Cole, M. T.; Fasoli, A.; Ali, S. Z.; Udrea, F.; Milne, W. I.

2013-06-01

In this paper, we demonstrate a micro-inkjet printing technique as a reproducible post-process for the deposition of carbon nanoparticles and fullerene adlayers onto fully CMOS compatible micro-electro-mechanical silicon-on-insulator infrared (IR) light sources to enhance their infrared emission. We show experimentally a significant increase in the infrared emission efficiency of the coated emitters. We numerically validate these findings with models suggesting a dominant performance increase for wavelengths <5.5 μm. Here, the bimodal size distribution in the diameter of the carbon nanoparticles, relative to the fullerenes, is an effective mediator towards topologically enhanced emittance of our miniaturised emitters. A 90% improvement in IR emission power density has been shown which we have rationalised with an increase in the mean thickness of the deposited carbon nanoparticle adlayer.

Microelectromechanical apparatus for elevating and tilting a platform

DOEpatents

Miller, Samuel Lee; McWhorter, Paul Jackson; Rodgers, Murray Steven; Sniegowski, Jeffry J.; Barnes, Stephen M.

2003-04-08

A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Microelectromechanical apparatus for elevating and tilting a platform

DOEpatents

Miller, Samuel Lee; McWhorter, Paul Jackson; Rodgers, Murray Steven; Sniegowski, Jeffry J.; Barnes, Stephen M.

2004-07-06

A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Large-area multiplexed sensing using MEMS and fiber optics

NASA Astrophysics Data System (ADS)

Miller, Michael B.; Clark, Richard L., Jr.; Bell, Clifton R.; Russler, Patrick M.

2000-06-01

Micro-electro-mechanical (MEMS) technology offers the ability to implement local and independent sensing and actuation functions through the coordinated response of discrete micro-electro-mechanical 'basis function' elements. The small size of micromechanical components coupled with the ability to reduce costs using volume manufacturing techniques opens up significant potential not only in military applications such as flight and engine monitoring and control, but in autonomous vehicle control, smart munitions, airborne reconnaissance, LADAR, missile guidance, and even in intelligent transportation systems and automotive guidance applications. In this program, Luna Innovations is developing a flexible, programmable interface which can be integrated direction with different types of MEMS sensors, and then used to multiplex many sensors ona single optical fiber to provide a unique combination of functions that will allow larger quantities of sensory input with better resolution than ever before possible.

a New Survey on Self-Tuning Integrated Low-Cost Gps/ins Vehicle Navigation System in Harsh Environment

NASA Astrophysics Data System (ADS)

Navidi, N.; Landry, R., Jr.

2015-08-01

Nowadays, Global Positioning System (GPS) receivers are aided by some complementary radio navigation systems and Inertial Navigation Systems (INS) to obtain more accuracy and robustness in land vehicular navigation. Extended Kalman Filter (EKF) is an acceptable conventional method to estimate the position, the velocity, and the attitude of the navigation system when INS measurements are fused with GPS data. However, the usage of the low-cost Inertial Measurement Units (IMUs) based on the Micro-Electro-Mechanical Systems (MEMS), for the land navigation systems, reduces the precision and stability of the navigation system due to their inherent errors. The main goal of this paper is to provide a new model for fusing low-cost IMU and GPS measurements. The proposed model is based on EKF aided by Fuzzy Inference Systems (FIS) as a promising method to solve the mentioned problems. This model considers the parameters of the measurement noise to adjust the measurement and noise process covariance. The simulation results show the efficiency of the proposed method to reduce the navigation system errors compared with EKF.

Viewing-zone scanning holographic display using a MEMS spatial light modulator.

PubMed

Takaki, Yasuhiro; Fujii, Keisuke

2014-10-06

Horizontally scanning holography using a spatial light modulator based on microelectromechanical system, which we previously proposed for enlarging both the screen size and the viewing zone, utilized a screen scanning system with elementary holograms being scanned horizontally on the screen. In this study, to enlarge the screen size and the viewing zone, we propose a viewing-zone scanning system with enlarged hologram screen and horizontally scanned reduced viewing zone. The reduced viewing zone is localized using converging light emitted from the screen, and the entire screen can be viewed from the localized viewing zone. An experimental system was constructed, and we demonstrated the generation of reconstructed images with a screen size of 2.0 in, a viewing zone width of 437 mm at a distance of 600 mm from the screen, and a frame rate of 60 Hz.

Nitride-Based Materials for Flexible MEMS Tactile and Flow Sensors in Robotics

PubMed Central

Abels, Claudio; Mastronardi, Vincenzo Mariano; Guido, Francesco; Dattoma, Tommaso; Qualtieri, Antonio; Megill, William M.; De Vittorio, Massimo; Rizzi, Francesco

2017-01-01

The response to different force load ranges and actuation at low energies is of considerable interest for applications of compliant and flexible devices undergoing large deformations. We present a review of technological platforms based on nitride materials (aluminum nitride and silicon nitride) for the microfabrication of a class of flexible micro-electro-mechanical systems. The approach exploits the material stress differences among the constituent layers of nitride-based (AlN/Mo, SixNy/Si and AlN/polyimide) mechanical elements in order to create microstructures, such as upwardly-bent cantilever beams and bowed circular membranes. Piezoresistive properties of nichrome strain gauges and direct piezoelectric properties of aluminum nitride can be exploited for mechanical strain/stress detection. Applications in flow and tactile sensing for robotics are described. PMID:28489040

Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror.

PubMed

Tan, Jiazheng; Sun, Weijie; Yeow, John T W

2017-05-26

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regulation problem theoretically. In this paper, based on the internal model principle, the output regulation problem is solved by designing a robust controller that is able to force the micromirror to track the command signal accurately. The proposed controller relies little on the accuracy of the model. Further, the proposed controller is implemented, and its effectiveness is examined by experiments. The experimental results demonstrate that the performance of the proposed controller is satisfying.

Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror

PubMed Central

Tan, Jiazheng; Sun, Weijie; Yeow, John T. W.

2017-01-01

The micromirror based on micro-electro-mechanical systems (MEMS) technology is widely employed in different areas, such as scanning, imaging and optical switching. This paper studies the MEMS electromagnetic micromirror for scanning or imaging application. In these application scenarios, the micromirror is required to track the command sinusoidal signal, which can be converted to an output regulation problem theoretically. In this paper, based on the internal model principle, the output regulation problem is solved by designing a robust controller that is able to force the micromirror to track the command signal accurately. The proposed controller relies little on the accuracy of the model. Further, the proposed controller is implemented, and its effectiveness is examined by experiments. The experimental results demonstrate that the performance of the proposed controller is satisfying. PMID:28587105

Actuators Based on Liquid Crystalline Elastomer Materials

PubMed Central

Jiang, Hongrui; Li, Chensha; Huang, Xuezhen

2013-01-01

Liquid crystalline elastomers (LCEs) exhibit a number of remarkable physical effects, including the unique, high-stroke reversible mechanical actuation when triggered by external stimuli. This article reviews some recent exciting developments in the field of LCEs materials with an emphasis on their utilization in actuator applications. Such applications include artificial muscles, industrial manufacturing, health and microelectromechanical systems (MEMS). With suitable synthetic and preparation pathways and well-controlled actuation stimuli, such as heat, light, electric and magnetic field, excellent physical properties of LCE materials can be realized. By comparing the actuating properties of different systems, general relationships between the structure and the property of LCEs are discussed. How these materials can be turned into usable devices using interdisciplinary techniques is also described. PMID:23648966

Actuators based on liquid crystalline elastomer materials

NASA Astrophysics Data System (ADS)

Jiang, Hongrui; Li, Chensha; Huang, Xuezhen

2013-05-01

Liquid crystalline elastomers (LCEs) exhibit a number of remarkable physical effects, including the unique, high-stroke reversible mechanical actuation when triggered by external stimuli. This article reviews some recent exciting developments in the field of LCE materials with an emphasis on their utilization in actuator applications. Such applications include artificial muscles, industrial manufacturing, health and microelectromechanical systems (MEMS). With suitable synthetic and preparation pathways and well-controlled actuation stimuli, such as heat, light, electric and magnetic fields, excellent physical properties of LCE materials can be realized. By comparing the actuating properties of different systems, general relationships between the structure and the properties of LCEs are discussed. How these materials can be turned into usable devices using interdisciplinary techniques is also described.

A force transmission system based on a tulip-shaped electrostatic clutch for haptic display devices

NASA Astrophysics Data System (ADS)

Sasaki, Hikaru; Shikida, Mitsuhiro; Sato, Kazuo

2006-12-01

This paper describes a novel type of force transmission system for haptic display devices. The system consists of an array of end-effecter elements, a force/displacement transmitter and a single actuator producing a large force/displacement. It has tulip-shaped electrostatic clutch devices to distribute the force/displacement from the actuator among the individual end effecters. The specifications of three components were determined to stimulate touched human fingers. The components were fabricated by using micro-electromechanical systems and conventional machining technologies, and finally they were assembled by hand. The performance of the assembled transmission system was experimentally examined and it was confirmed that each projection in the arrayed end effecters could be moved individually. The actuator in a system whose total size was only 3.0 cm × 3.0 cm × 4.0 cm produced a 600 mN force and displaced individual array elements by 18 µm.

Optical and Acoustic Sensor-Based 3D Ball Motion Estimation for Ball Sport Simulators †.

PubMed

Seo, Sang-Woo; Kim, Myunggyu; Kim, Yejin

2018-04-25

Estimation of the motion of ball-shaped objects is essential for the operation of ball sport simulators. In this paper, we propose an estimation system for 3D ball motion, including speed and angle of projection, by using acoustic vector and infrared (IR) scanning sensors. Our system is comprised of three steps to estimate a ball motion: sound-based ball firing detection, sound source localization, and IR scanning for motion analysis. First, an impulsive sound classification based on the mel-frequency cepstrum and feed-forward neural network is introduced to detect the ball launch sound. An impulsive sound source localization using a 2D microelectromechanical system (MEMS) microphones and delay-and-sum beamforming is presented to estimate the firing position. The time and position of a ball in 3D space is determined from a high-speed infrared scanning method. Our experimental results demonstrate that the estimation of ball motion based on sound allows a wider activity area than similar camera-based methods. Thus, it can be practically applied to various simulations in sports such as soccer and baseball.

Gas detection with microelectromechanical Fabry-Perot interferometer technology in cell phone

NASA Astrophysics Data System (ADS)

Mannila, Rami; Hyypiö, Risto; Korkalainen, Marko; Blomberg, Martti; Kattelus, Hannu; Rissanen, Anna

2015-06-01

VTT Technical Research Centre of Finland has developed a miniaturized optical sensor for gas detection in a cell phone. The sensor is based on a microelectromechanical (MEMS) Fabry-Perot interferometer, which is a structure with two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. VTT has designed and manufactured a MEMS FPI based carbon dioxide sensor demonstrator which is integrated to a cell phone shield cover. The demonstrator contains light source, gas cell, MEMS FPI, detector, control electronics and two coin cell batteries as a power source. It is connected to the cell phone by Bluetooth. By adjusting the wavelength range and customizing the MEMS FPI structure, it is possible to selectively sense multiple gases.

Novel Hybrid of LS-SVM and Kalman Filter for GPS/INS Integration

NASA Astrophysics Data System (ADS)

Xu, Zhenkai; Li, Yong; Rizos, Chris; Xu, Xiaosu

Integration of Global Positioning System (GPS) and Inertial Navigation System (INS) technologies can overcome the drawbacks of the individual systems. One of the advantages is that the integrated solution can provide continuous navigation capability even during GPS outages. However, bridging the GPS outages is still a challenge when Micro-Electro-Mechanical System (MEMS) inertial sensors are used. Methods being currently explored by the research community include applying vehicle motion constraints, optimal smoother, and artificial intelligence (AI) techniques. In the research area of AI, the neural network (NN) approach has been extensively utilised up to the present. In an NN-based integrated system, a Kalman filter (KF) estimates position, velocity and attitude errors, as well as the inertial sensor errors, to output navigation solutions while GPS signals are available. At the same time, an NN is trained to map the vehicle dynamics with corresponding KF states, and to correct INS measurements when GPS measurements are unavailable. To achieve good performance it is critical to select suitable quality and an optimal number of samples for the NN. This is sometimes too rigorous a requirement which limits real world application of NN-based methods.The support vector machine (SVM) approach is based on the structural risk minimisation principle, instead of the minimised empirical error principle that is commonly implemented in an NN. The SVM can avoid local minimisation and over-fitting problems in an NN, and therefore potentially can achieve a higher level of global performance. This paper focuses on the least squares support vector machine (LS-SVM), which can solve highly nonlinear and noisy black-box modelling problems. This paper explores the application of the LS-SVM to aid the GPS/INS integrated system, especially during GPS outages. The paper describes the principles of the LS-SVM and of the KF hybrid method, and introduces the LS-SVM regression algorithm. Field test data is processed to evaluate the performance of the proposed approach.

Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom

DOEpatents

Fleming, James G [Albuquerque, NM

2008-03-04

A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.

Flexible Packaging by Film-Assisted Molding for Microintegration of Inertia Sensors

PubMed Central

Hera, Daniel; Berndt, Armin; Günther, Thomas; Schmiel, Stephan; Harendt, Christine; Zimmermann, André

2017-01-01

Packaging represents an important part in the microintegration of sensors based on microelectromechanical system (MEMS). Besides miniaturization and integration density, functionality and reliability in combination with flexibility in packaging design at moderate costs and consequently high-mix, low-volume production are the main requirements for future solutions in packaging. This study investigates possibilities employing printed circuit board (PCB-)based assemblies to provide high flexibility for circuit designs together with film-assisted transfer molding (FAM) to package sensors. The feasibility of FAM in combination with PCB and MEMS as a packaging technology for highly sensitive inertia sensors is being demonstrated. The results prove the technology to be a viable method for damage-free packaging of stress- and pressure-sensitive MEMS. PMID:28653992

A sensitive, handheld vapor sensor based on microcantilevers

NASA Astrophysics Data System (ADS)

Pinnaduwage, L. A.; Hedden, D. L.; Gehl, A.; Boiadjiev, V. I.; Hawk, J. E.; Farahi, R. H.; Thundat, T.; Houser, E. J.; Stepnowski, S.; McGill, R. A.; Deel, L.; Lareau, R. T.

2004-11-01

We report the development of a handheld sensor based on piezoresistive microcantilevers that does not depend on optical detection, yet has high detection sensitivity. The sensor is able to detect vapors from the plastic explosives pentaerythritol tetranitrate and hexahydro-1,3,5-triazine at levels below 10 parts per trillion within few seconds of exposure under ambient conditions. A differential measurement technique has yielded a rugged sensor that is unaffected by vibration and is able to function as a "sniffer." The microelectromechanical system sensor design allows for the incorporation of hundreds of microcantilevers with suitable coatings in order to achieve sufficient selectivity in the future, and thus could provide an inexpensive, unique platform for the detection of chemical, biological, and explosive materials.

Mini-Warriors: Microelectromechanical Systems: A Munitions Revolution

DTIC Science & Technology

2014-02-01

hand-held con- troller senses and transmits body movements to the video game—much like the Lycra suit with 85 MEMS, worn by ac- tors, which aided...for the anti-torpedo tor- pedo . Although it uses a macro-size fuze, significantly reduced in size by the Division, its experimental MEMS fuze informed

75 FR 80800 - Notice of Availability of Government-Owned Inventions; Available for Licensing

Federal Register 2010, 2011, 2012, 2013, 2014

2010-12-23

... made available for licensing by the Department of the Navy. Navy Case No. 83951--Apparatus and System... No. 98721--Static Wireless Data-Glove Apparatus for Gesture Processing and Recognition and... Avoidance Decisions; Navy Case No. 98745--Method of Fabricating A Micro-Electro-Mechanical Apparatus for...

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges.

PubMed

Herrera-May, Agustín Leobardo; Soler-Balcazar, Juan Carlos; Vázquez-Leal, Héctor; Martínez-Castillo, Jaime; Vigueras-Zuñiga, Marco Osvaldo; Aguilera-Cortés, Luz Antonio

2016-08-24

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases).

Design, fabrication, and packaging of an integrated, wirelessly-powered optrode array for optogenetics application

PubMed Central

Kwon, Ki Yong; Lee, Hyung-Min; Ghovanloo, Maysam; Weber, Arthur; Li, Wen

2015-01-01

The recent development of optogenetics has created an increased demand for advancing engineering tools for optical modulation of neural circuitry. This paper details the design, fabrication, integration, and packaging procedures of a wirelessly-powered, light emitting diode (LED) coupled optrode neural interface for optogenetic studies. The LED-coupled optrode array employs microscale LED (μLED) chips and polymer-based microwaveguides to deliver light into multi-level cortical networks, coupled with microelectrodes to record spontaneous changes in neural activity. An integrated, implantable, switched-capacitor based stimulator (SCS) system provides high instantaneous power to the μLEDs through an inductive link to emit sufficient light and evoke neural activities. The presented system is mechanically flexible, biocompatible, miniaturized, and lightweight, suitable for chronic implantation in small freely behaving animals. The design of this system is scalable and its manufacturing is cost effective through batch fabrication using microelectromechanical systems (MEMS) technology. It can be adopted by other groups and customized for specific needs of individual experiments. PMID:25999823

Recent Advances of MEMS Resonators for Lorentz Force Based Magnetic Field Sensors: Design, Applications and Challenges

PubMed Central

Herrera-May, Agustín Leobardo; Soler-Balcazar, Juan Carlos; Vázquez-Leal, Héctor; Martínez-Castillo, Jaime; Vigueras-Zuñiga, Marco Osvaldo; Aguilera-Cortés, Luz Antonio

2016-01-01

Microelectromechanical systems (MEMS) resonators have allowed the development of magnetic field sensors with potential applications such as biomedicine, automotive industry, navigation systems, space satellites, telecommunications and non-destructive testing. We present a review of recent magnetic field sensors based on MEMS resonators, which operate with Lorentz force. These sensors have a compact structure, wide measurement range, low energy consumption, high sensitivity and suitable performance. The design methodology, simulation tools, damping sources, sensing techniques and future applications of magnetic field sensors are discussed. The design process is fundamental in achieving correct selection of the operation principle, sensing technique, materials, fabrication process and readout systems of the sensors. In addition, the description of the main sensing systems and challenges of the MEMS sensors are discussed. To develop the best devices, researches of their mechanical reliability, vacuum packaging, design optimization and temperature compensation circuits are needed. Future applications will require multifunctional sensors for monitoring several physical parameters (e.g., magnetic field, acceleration, angular ratio, humidity, temperature and gases). PMID:27563912

Selected examples of intelligent (micro) sensor systems: state-of-the-art and tendencies

NASA Astrophysics Data System (ADS)

Hauptmann, Peter R.

2006-03-01

The capability of intelligent sensors to have more intelligence built into them continues to drive their application in areas including automotive, aerospace and defense, industrial, intelligent house and wear, medical and homeland security. In principle it is difficult to overestimate the importance of intelligent (micro) sensors or sensor systems within advanced societies but one characteristic feature is the global market for sensors, which is now about 20 billion annually. Therefore sensors or sensor systems play a dominant role in many fields from the macro sensor in manufacturing industry down to the miniaturized sensor for medical applications. The diversity of sensors precludes a complete description of the state-of-the-art; selected examples will illustrate the current situation. MEMS (microelectromechanical systems) devices are of special interest in the context of micro sensor systems. In past the main requirements of a sensor were in terms of metrological performance. The electrical (or optical) signal produced by the sensor needed to match the measure relatively accurately. Such basic functionality is no longer sufficient. Data processing near the sensor, the extraction of more information than just the direct sensor information by signal analysis, system aspects and multi-sensor information are the new demands. A shifting can be observed away from aiming to design perfect single-function transducers and towards the utilization of system-based sensors as system components. In the ideal case such systems contain sensors, actuators and electronics. They can be realized in monolithic, hybrid or discrete form—which kind is used depends on the application. In this article the state-of-the-art of intelligent sensors or sensor systems is reviewed using selected examples. Future trends are deduced.

Sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes.

PubMed

Lee, Chi-Yuan; Su, Ay; Liu, Yin-Chieh; Chan, Pin-Cheng; Lin, Chia-Hung

2010-01-01

In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06±0.005 (Ω/°C) and 0.033 pF/%RH, respectively.

Study of Vacuum Energy Physics for Breakthrough Propulsion

NASA Technical Reports Server (NTRS)

Millis, Marc G. (Technical Monitor); Maclay, G. Jordan; Hammer, Jay; Clark, Rod; George, Michael; Kim, Yeong; Kir, Asit

2004-01-01

This report summarizes the accomplishments during a three year research project to investigate the use of surfaces, particularly in microelectromechanical systems (MEMS), to exploit quantum vacuum forces. During this project, we developed AFM instrumentation to repeatably measure Casimir forces in the nanoNewton range at 10 6 torr, designed an experiment to measure attractive and repulsive quantum vacuum forces, developed a QED based theory of Casimir forces that includes non-ideal material properties for rectangular cavities and for multilayer slabs, developed theoretical models for a variety of microdevices utilizing vacuum forces, applied vacuum physics to a gedanken spacecraft, and investigated a new material with a negative index of refraction.

High quality factor single-crystal diamond mechanical resonators

NASA Astrophysics Data System (ADS)

Ovartchaiyapong, P.; Pascal, L. M. A.; Myers, B. A.; Lauria, P.; Bleszynski Jayich, A. C.

2012-10-01

Single-crystal diamond is a promising material for microelectromechanical systems (MEMs) because of its low mechanical loss, compatibility with extreme environments, and built-in interface to high-quality spin centers. But its use has been limited by challenges in processing and growth. We demonstrate a wafer bonding-based technique to form diamond on insulator, from which we make single-crystal diamond micromechanical resonators with mechanical quality factors as high as 338 000 at room temperature. Variable temperature measurements down to 10 K reveal a nonmonotonic dependence of quality factor on temperature. These resonators enable integration of single-crystal diamond into MEMs technology for classical and quantum applications.

Comparative study on different types of segmented micro deformable mirrors

NASA Astrophysics Data System (ADS)

Qiao, Dayong; Yuan, Weizheng; Li, Kaicheng; Li, Xiaoying; Rao, Fubo

2006-02-01

In an adaptive-optical (AO) system, the wavefront of optical beam can be corrected with deformable mirror (DM). Based on MicroElectroMechanical System (MEMS) technology, segmented micro deformable mirrors can be built with denser actuator spacing than continuous face-sheet designs and have been widely researched. But the influence of the segment structure has not been thoroughly discussed until now. In this paper, the design, performance and fabrication of several micromachined, segmented deformable mirror for AO were investigated. The wavefront distorted by atmospheric turbulence was simulated in the frame of Kolmogorov turbulence model. Position function was used to describe the surfaces of the micro deformable mirrors in working state. The performances of deformable mirrors featuring square, brick, hexagonal and ring segment structures were evaluated in criteria of phase fitting error, the Strehl ratio after wavefront correction and the design considerations. Then the micro fabrication process and mask layout were designed and the fabrication of micro deformable mirrors was implemented. The results show that the micro deformable mirror with ring segments performs the best, but it is very difficult in terms of layout design. The micro deformable mirrors with square and brick segments are easy to design, but their performances are not good. The micro deformable mirror with hexagonal segments has not only good performance in terms of phase fitting error, the Strehl ratio and actuation voltage, but also no overwhelming difficulty in layout design.

A Three-Dimensional Microdisplacement Sensing System Based on MEMS Bulk-Silicon Technology

PubMed Central

Wu, Junjie; Lei, Lihua; Chen, Xin; Cai, Xiaoyu; Li, Yuan; Han, Tao

2014-01-01

For the dimensional measurement and characterization of microsized and nanosized components, a three-dimensional microdisplacement sensing system was developed using the piezoresistive effect in silicon. The sensor was fabricated using microelectromechanical system bulk-silicon technology, and it was validated using the finite element method. A precise data acquisition circuit with an accuracy of 20 μV was designed to obtain weak voltage signals. By calibration, the sensing system was shown to have a sensitivity of 17.29 mV/μm and 4.59 mV/μm in the axial and lateral directions, respectively; the nonlinearity in these directions was 0.8% and 1.0% full scale, respectively. A full range of 4.6 μm was achieved in the axial direction. Results of a resolution test indicated that the sensing system had a resolution of 5 nm in the axial direction and 10 nm in the lateral direction. PMID:25360581

Holographic memory using beam steering

NASA Technical Reports Server (NTRS)

Chao, Tien-Hsin (Inventor); Hanan, Jay C. (Inventor); Reyes, George F. (Inventor); Zhou, Hanying (Inventor)

2006-01-01

A method, apparatus, and system provide the ability for storing holograms at high speed. A single laser diode emits a collimated laser beam to both write to and read from a photorefractice crystal. One or more liquid crystal beam steering spatial light modulators (BSSLMs) or Micro-Electro-Mechanical Systems (MEMS) mirrors steer a reference beam, split from the collimated laser beam, at high speed to the photorefractive crystal.

Joint Terminal Attack Controllers Sensors and Lasers Modernization

DTIC Science & Technology

2012-09-01

and Evaluation Activity MCSC Marine Corps Systems Command MCT Marine Corps Task MCTL Marine Corps Task List MEMS MicroElectroMechanical Systems...functional relationship of the key performance requirements was associated to Marine Corps Tasks ( MCT ), Critical Operational Issues (COIs...to an accomplishment of mission objectives and achievement of desired results [5]. All COIs are linked to a MCT , which are provided within the

Radio Frequency (RF) Micro-Electromechanical Systems (MEMS) Switches for Space Communications

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Ponchak, George E.; Scardelletti, Maximillian C.; Varaljay, Nicholas C.

2000-01-01

Micro-electromechanical systems (MEMS) is an emerging technology for radio frequency (RF) systems because it has the potential to dramatically decrease loss and improve efficiency. In this paper, we address the design and fabrication of novel MEMS switches being developed at NASA Glenn Research Center. Two types of switches are being developed: a microstrip series single pole single throw (SPST) switch and a coplanar waveguide (CPW) series SPST and single pole double throw (SPDT) switches. These are being fabricated as an integral part of 50 Ohm microstrip and CPW RF integrated circuits using microfabrication techniques. The construction of the switch relies on a cantilever beam that is partially supported by a dielectric post. The cantilever beam is electro-magnetically actuated. To decrease stiction, a Si3N4 thin film is deposited over the contact area. Thus, when the switch is closed, the ON-state insertion loss is governed by the parallel plate capacitance formed by the two contacts. The isolation in the OFF-state is governed by the parasitic capacitance when the cantilever is in the up position. RF MEMS switches have been demonstrated with 80% lower insertion loss than conventional solid state devices (GaAs Metal Semiconductor Field Effect Transistors (MESFETs) and Silicon PIN diodes) based switches. For example, a conventional GaAs five-bit phase shifter which is required for beam steering in a phased array antenna has approximately 7 dB of insertion loss at 26.5 GHz where as a comparable MEMS based phase shifter is expected to have only 2 dB of insertion loss. This translates into 56% lower power dissipation and therefore decreases the thermal load on the spacecraft and also reduces the power amplifier requirements. These benefits will enable NASA to build the next generation of deep space science crafts and micro/nano satellites.

Enabling Decisive Strategic Maneuver for the Army Beyond 2010

DTIC Science & Technology

1999-08-01

System and a small Advanced Fire Support System ( AFSS ). In the long run, it might be better to have several vehicles share an AFSS . These are...18 tons M-113APC 9 tons C’OTM 4 tons Flyer w/5 ton AFSS 10 tons Flyer, 5 ton resupply 10 tons Robotic rotorcraft Self ferry All systems were...Task Force Man-portable Air Defense System Manpower and Personnel Integration Micro- Autonomous Vehicles Micro-Electro-Mechanics Micro Electric

Observability Analysis of a MEMS INS/GPS Integration System with Gyroscope G-Sensitivity Errors

PubMed Central

Fan, Chen; Hu, Xiaoping; He, Xiaofeng; Tang, Kanghua; Luo, Bing

2014-01-01

Gyroscopes based on micro-electromechanical system (MEMS) technology suffer in high-dynamic applications due to obvious g-sensitivity errors. These errors can induce large biases in the gyroscope, which can directly affect the accuracy of attitude estimation in the integration of the inertial navigation system (INS) and the Global Positioning System (GPS). The observability determines the existence of solutions for compensating them. In this paper, we investigate the observability of the INS/GPS system with consideration of the g-sensitivity errors. In terms of two types of g-sensitivity coefficients matrix, we add them as estimated states to the Kalman filter and analyze the observability of three or nine elements of the coefficient matrix respectively. A global observable condition of the system is presented and validated. Experimental results indicate that all the estimated states, which include position, velocity, attitude, gyro and accelerometer bias, and g-sensitivity coefficients, could be made observable by maneuvering based on the conditions. Compared with the integration system without compensation for the g-sensitivity errors, the attitude accuracy is raised obviously. PMID:25171122

Observability analysis of a MEMS INS/GPS integration system with gyroscope G-sensitivity errors.

PubMed

Fan, Chen; Hu, Xiaoping; He, Xiaofeng; Tang, Kanghua; Luo, Bing

2014-08-28

Gyroscopes based on micro-electromechanical system (MEMS) technology suffer in high-dynamic applications due to obvious g-sensitivity errors. These errors can induce large biases in the gyroscope, which can directly affect the accuracy of attitude estimation in the integration of the inertial navigation system (INS) and the Global Positioning System (GPS). The observability determines the existence of solutions for compensating them. In this paper, we investigate the observability of the INS/GPS system with consideration of the g-sensitivity errors. In terms of two types of g-sensitivity coefficients matrix, we add them as estimated states to the Kalman filter and analyze the observability of three or nine elements of the coefficient matrix respectively. A global observable condition of the system is presented and validated. Experimental results indicate that all the estimated states, which include position, velocity, attitude, gyro and accelerometer bias, and g-sensitivity coefficients, could be made observable by maneuvering based on the conditions. Compared with the integration system without compensation for the g-sensitivity errors, the attitude accuracy is raised obviously.

Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope

NASA Astrophysics Data System (ADS)

Krauter, Johann; Osten, Wolfgang

2018-03-01

There are a wide range of applications for micro-electro-mechanical systems (MEMS). The automotive and consumer market is the strongest driver for the growing MEMS industry. A 100 % test of MEMS is particularly necessary since these are often used for safety-related purposes such as the ESP (Electronic Stability Program) system. The production of MEMS is a fully automated process that generates 90 % of the costs during the packaging and dicing steps. Nowadays, an electrical test is carried out on each individual MEMS component before these steps. However, after encapsulation, MEMS are opaque to visible light and other defects cannot be detected. Therefore, we apply an infrared low-coherence interferometer for the topography measurement of those hidden structures. A lock-in algorithm-based method is shown to calculate the object height and to reduce ghost steps due to the 2π -unambiguity. Finally, measurements of different MEMS-based sensors are presented.

Steering liquid metal flow in microchannels using low voltages.

PubMed

Tang, Shi-Yang; Lin, Yiliang; Joshipura, Ishan D; Khoshmanesh, Khashayar; Dickey, Michael D

2015-10-07

Liquid metals based on gallium, such as eutectic gallium indium (EGaIn) and Galinstan, have been integrated as static components in microfluidic systems for a wide range of applications including soft electrodes, pumps, and stretchable electronics. However, there is also a possibility to continuously pump liquid metal into microchannels to create shape reconfigurable metallic structures. Enabling this concept necessitates a simple method to control dynamically the path the metal takes through branched microchannels with multiple outlets. This paper demonstrates a novel method for controlling the directional flow of EGaIn liquid metal in complex microfluidic networks by simply applying a low voltage to the metal. According to the polarity of the voltage applied between the inlet and an outlet, two distinct mechanisms can occur. The voltage can lower the interfacial tension of the metal via electrocapillarity to facilitate the flow of the metal towards outlets containing counter electrodes. Alternatively, the voltage can drive surface oxidation of the metal to form a mechanical impediment that redirects the movement of the metal towards alternative pathways. Thus, the method can be employed like a 'valve' to direct the pathway chosen by the metal without mechanical moving parts. The paper elucidates the operating mechanisms of this valving system and demonstrates proof-of-concept control over the flow of liquid metal towards single or multiple directions simultaneously. This method provides a simple route to direct the flow of liquid metal for applications in microfluidics, optics, electronics, and microelectromechanical systems.

Solid-State Nuclear Power

NASA Technical Reports Server (NTRS)

George, Jeffrey A.

2012-01-01

A strategy for "Solid-State" Nuclear Power is proposed to guide development of technologies and systems into the second 50 years of nuclear spaceflight. The strategy emphasizes a simple and highly integrated system architecture with few moving parts or fluid loops; the leverage of modern advances in materials, manufacturing, semiconductors, microelectromechanical and nanotechnology devices; and the targeted advancement of high temperature nuclear fuels, materials and static power conversion to enable high performance from simple system topologies.

Electrical latching of microelectromechanical devices

DOEpatents

Garcia, Ernest J.; Sleefe, Gerard E.

2004-11-02

Methods are disclosed for row and column addressing of an array of microelectromechanical (MEM) devices. The methods of the present invention are applicable to MEM micromirrors or memory elements and allow the MEM array to be programmed and maintained latched in a programmed state with a voltage that is generally lower than the voltage required for electrostatically switching the MEM devices.

Chemical-mechanical polishing of recessed microelectromechanical devices

DOEpatents

Barron, Carole C.; Hetherington, Dale L.; Montague, Stephen

1999-01-01

A method is disclosed for micromachining recessed layers (e.g. sacrificial layers) of a microelectromechanical system (MEMS) device formed in a cavity etched into a semiconductor substrate. The method uses chemical-mechanical polishing (CMP) with a resilient polishing pad to locally planarize one or more of the recessed layers within the substrate cavity. Such local planarization using the method of the present invention is advantageous for improving the patterning of subsequently deposited layers, for eliminating mechanical interferences between functional elements (e.g. linkages) of the MEMS device, and for eliminating the formation of stringers. After the local planarization of one or more of the recessed layers, another CMP step can be provided for globally planarizing the semiconductor substrate to form a recessed MEMS device which can be integrated with electronic circuitry (e.g. CMOS, BiCMOS or bipolar circuitry) formed on the surface of the substrate.

Microelectromechanical pump utilizing porous silicon

DOEpatents

Lantz, Jeffrey W [Albuquerque, NM; Stalford, Harold L [Norman, OK

2011-07-19

A microelectromechanical (MEM) pump is disclosed which includes a porous silicon region sandwiched between an inlet chamber and an outlet chamber. The porous silicon region is formed in a silicon substrate and contains a number of pores extending between the inlet and outlet chambers, with each pore having a cross-section dimension about equal to or smaller than a mean free path of a gas being pumped. A thermal gradient is provided along the length of each pore by a heat source which can be an electrical resistance heater or an integrated circuit (IC). A channel can be formed through the silicon substrate so that inlet and outlet ports can be formed on the same side of the substrate, or so that multiple MEM pumps can be connected in series to form a multi-stage MEM pump. The MEM pump has applications for use in gas-phase MEM chemical analysis systems, and can also be used for passive cooling of ICs.

Chemical-mechanical polishing of recessed microelectromechanical devices

DOEpatents

Barron, C.C.; Hetherington, D.L.; Montague, S.

1999-07-06

A method is disclosed for micromachining recessed layers (e.g. sacrificial layers) of a microelectromechanical system (MEMS) device formed in a cavity etched into a semiconductor substrate. The method uses chemical-mechanical polishing (CMP) with a resilient polishing pad to locally planarize one or more of the recessed layers within the substrate cavity. Such local planarization using the method of the present invention is advantageous for improving the patterning of subsequently deposited layers, for eliminating mechanical interferences between functional elements (e.g. linkages) of the MEMS device, and for eliminating the formation of stringers. After the local planarization of one or more of the recessed layers, another CMP step can be provided for globally planarizing the semiconductor substrate to form a recessed MEMS device which can be integrated with electronic circuitry (e.g., CMOS, BiCMOS or bipolar circuitry) formed on the surface of the substrate. 23 figs.

An adaptive compensation algorithm for temperature drift of micro-electro-mechanical systems gyroscopes using a strong tracking Kalman filter.

PubMed

Feng, Yibo; Li, Xisheng; Zhang, Xiaojuan

2015-05-13

We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS) gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyroscope temperature drift is constructed mostly on the basis of the temperature sensitivity of the gyroscope. As the state variables of a strong tracking Kalman filter (STKF), the parameters of the temperature drift model can be calculated to adapt to the environment under the support of the compass. These parameters change intelligently with the environment to maintain the precision of the MEMS gyroscope in the changing temperature. The heading error is less than 0.6° in the static temperature experiment, and also is kept in the range from 5° to -2° in the dynamic outdoor experiment. This demonstrates that the proposed algorithm exhibits strong adaptability to a changing temperature, and performs significantly better than KF and MLR to compensate the temperature drift of a gyroscope and eliminate the influence of temperature variation.

Applying the miniaturization technologies for biosensor design.

PubMed

Derkus, Burak

2016-05-15

Microengineering technologies give us some opportunities in developing high-tech sensing systems that operate with low volumes of samples, integrates one or more laboratory functions on a single substrate, and enables automation. These millimetric sized devices can be produced for only a few dollars, which makes them promising candidates for mass-production. Besides electron beam lithography, stencil lithography, nano-imprint lithography or dip pen lithography, basic photolithography is the technique which is extensively used for the design of microengineered sensing systems. This technique has some advantages such as easy-to-manufacture, do not require expensive instrumentation, and allow creation of lower micron-sized patterns. In this review, it has been focused on three different type of microengineered sensing devices which are developed using micro/nano-patterning techniques, microfluidic technology, and microelectromechanics system based technology. Copyright © 2016 Elsevier B.V. All rights reserved.

Performance Analysis on Carrier Phase-Based Tightly-Coupled GPS/BDS/INS Integration in GNSS Degraded and Denied Environments

PubMed Central

Han, Houzeng; Wang, Jian; Wang, Jinling; Tan, Xinglong

2015-01-01

The integration of Global Navigation Satellite Systems (GNSS) carrier phases with Inertial Navigation System (INS) measurements is essential to provide accurate and continuous position, velocity and attitude information, however it is necessary to fix ambiguities rapidly and reliably to obtain high accuracy navigation solutions. In this paper, we present the notion of combining the Global Positioning System (GPS), the BeiDou Navigation Satellite System (BDS) and low-cost micro-electro-mechanical sensors (MEMS) inertial systems for reliable navigation. An adaptive multipath factor-based tightly-coupled (TC) GPS/BDS/INS integration algorithm is presented and the overall performance of the integrated system is illustrated. A twenty seven states TC GPS/BDS/INS model is adopted with an extended Kalman filter (EKF), which is carried out by directly fusing ambiguity fixed double-difference (DD) carrier phase measurements with the INS predicted pseudoranges to estimate the error states. The INS-aided integer ambiguity resolution (AR) strategy is developed by using a dynamic model, a two-step estimation procedure is applied with adaptively estimated covariance matrix to further improve the AR performance. A field vehicular test was carried out to demonstrate the positioning performance of the combined system. The results show the TC GPS/BDS/INS system significantly improves the single-epoch AR reliability as compared to that of GPS/BDS-only or single satellite navigation system integrated strategy, especially for high cut-off elevations. The AR performance is also significantly improved for the combined system with adaptive covariance matrix in the presence of low elevation multipath related to the GNSS-only case. A total of fifteen simulated outage tests also show that the time to relock of the GPS/BDS signals is shortened, which improves the system availability. The results also indicate that TC integration system achieves a few centimeters accuracy in positioning based on the comparison analysis and covariance analysis, even in harsh environments (e.g., in urban canyons), thus we can see the advantage of positioning at high cut-off elevations that the combined GPS/BDS brings. PMID:25875191

Performance analysis on carrier phase-based tightly-coupled GPS/BDS/INS integration in GNSS degraded and denied environments.

PubMed

Han, Houzeng; Wang, Jian; Wang, Jinling; Tan, Xinglong

2015-04-14

The integration of Global Navigation Satellite Systems (GNSS) carrier phases with Inertial Navigation System (INS) measurements is essential to provide accurate and continuous position, velocity and attitude information, however it is necessary to fix ambiguities rapidly and reliably to obtain high accuracy navigation solutions. In this paper, we present the notion of combining the Global Positioning System (GPS), the BeiDou Navigation Satellite System (BDS) and low-cost micro-electro-mechanical sensors (MEMS) inertial systems for reliable navigation. An adaptive multipath factor-based tightly-coupled (TC) GPS/BDS/INS integration algorithm is presented and the overall performance of the integrated system is illustrated. A twenty seven states TC GPS/BDS/INS model is adopted with an extended Kalman filter (EKF), which is carried out by directly fusing ambiguity fixed double-difference (DD) carrier phase measurements with the INS predicted pseudoranges to estimate the error states. The INS-aided integer ambiguity resolution (AR) strategy is developed by using a dynamic model, a two-step estimation procedure is applied with adaptively estimated covariance matrix to further improve the AR performance. A field vehicular test was carried out to demonstrate the positioning performance of the combined system. The results show the TC GPS/BDS/INS system significantly improves the single-epoch AR reliability as compared to that of GPS/BDS-only or single satellite navigation system integrated strategy, especially for high cut-off elevations. The AR performance is also significantly improved for the combined system with adaptive covariance matrix in the presence of low elevation multipath related to the GNSS-only case. A total of fifteen simulated outage tests also show that the time to relock of the GPS/BDS signals is shortened, which improves the system availability. The results also indicate that TC integration system achieves a few centimeters accuracy in positioning based on the comparison analysis and covariance analysis, even in harsh environments (e.g., in urban canyons), thus we can see the advantage of positioning at high cut-off elevations that the combined GPS/BDS brings.

Using the Wiimote to Learn MEMS in a Physics Degree Program

ERIC Educational Resources Information Center

Sánchez-Azqueta, Carlos; Gimeno, Cecilia; Celma, Santiago; Aldea, Concepción

2016-01-01

This paper describes a learning experience designed to introduce students in a Micro- and Nanosystems course in a Physics Bachelor's degree program to the use of professional tools for the design and characterization of micro-electromechanical systems (MEMS) through a specific commercial case: the MEMS used by the well-known gaming platform…

3-D Printing as an Effective Educational Tool for MEMS Design and Fabrication

ERIC Educational Resources Information Center

Dahle, Reena; Rasel, Rafiul

2016-01-01

This paper presents a series of course modules developed as a high-impact and cost-effective learning tool for modeling and simulating the microfabrication process and design of microelectromechanical systems (MEMS) devices using three-dimensional (3-D) printing. Microfabrication technology is an established fabrication technique for small and…

Non-Destructive Damping Measurement for Wafer-Level Packaged Microelectromechanical System (MEMS) Acceleration Switches

DTIC Science & Technology

2014-09-01

Micromechanics and Microengineering . 2005;15:176–184. 10. Mohite SS, Kesari H, Sonti VR, Pratap R. Analytical solutions for the stiffness and damping...coefficients of squeeze films in MEMS devices with perforated back plates. Journal of Micromechanics and Microengineering . 2005;15:2083–2092. 11. Younis MI

Breakthrough: micro-electronic photovoltaics

ScienceCinema

Okandan, Murat; Gupta, Vipin

2018-01-16

Sandia developed tiny glitter-sized photovoltaic (PV) cells that could revolutionize solar energy collection. The crystalline silicon micro-PV cells will be cheaper and have greater efficiencies than current PV collectors. Micro-PV cells require relatively little material to form well-controlled, highly efficient devices. Cell fabrication uses common microelectric and micro-electromechanical systems (MEMS) techniques.

Electrostatic Radio Frequency (RF) Microelectromechanical Systems (MEMS) Switches With Metal Alloy Electric Contacts

DTIC Science & Technology

2004-09-01

Serway , Raymond A. Physics for Scientists and Engineers . New York: Saunders College Publishing, 1986. 141. Sharvin, Y.V. Sov. Phys. JETP , 21 :655 (1965...III. Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17 3.1 Micro-Switch Physical Description . . . . . . . . . . . 17 3.2 MEMS...Insertion Loss . . . . . . . . . . . . . . . . . . . . . . . . 56 IMD Intermodulation Distortion . . . . . . . . . . . . . . . . 56 PVD Physical Vapor

A 0.2 V Micro-Electromechanical Switch Enabled by a Phase Transition.

PubMed

Dong, Kaichen; Choe, Hwan Sung; Wang, Xi; Liu, Huili; Saha, Bivas; Ko, Changhyun; Deng, Yang; Tom, Kyle B; Lou, Shuai; Wang, Letian; Grigoropoulos, Costas P; You, Zheng; Yao, Jie; Wu, Junqiao

2018-04-01

Micro-electromechanical (MEM) switches, with advantages such as quasi-zero leakage current, emerge as attractive candidates for overcoming the physical limits of complementary metal-oxide semiconductor (CMOS) devices. To practically integrate MEM switches into CMOS circuits, two major challenges must be addressed: sub 1 V operating voltage to match the voltage levels in current circuit systems and being able to deliver at least millions of operating cycles. However, existing sub 1 V mechanical switches are mostly subject to significant body bias and/or limited lifetimes, thus failing to meet both limitations simultaneously. Here 0.2 V MEM switching devices with ≳10 6 safe operating cycles in ambient air are reported, which achieve the lowest operating voltage in mechanical switches without body bias reported to date. The ultralow operating voltage is mainly enabled by the abrupt phase transition of nanolayered vanadium dioxide (VO 2 ) slightly above room temperature. The phase-transition MEM switches open possibilities for sub 1 V hybrid integrated devices/circuits/systems, as well as ultralow power consumption sensors for Internet of Things applications. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Incorporating 2D Materials with Micro-electromechanical Systems to Explore Strain Physics and Devices

NASA Astrophysics Data System (ADS)

Christopher, Jason; Vutukuru, Mounika; Kohler, Travis; Bishop, David; Swan, Anna; Goldberg, Bennett

2D materials can withstand an order of magnitude more strain than their bulk counterparts which can be used to dramatically change electrical, thermal and optical properties or even cause unconventional behavior such as generating pseudo-magnetic fields. Here we present micro-electromechanical systems (MEMS) as a platform for straining 2D materials to make such novel phenomena accessible. Unlike other strain techniques, MEMS are capable of precisely controlling the magnitude and orientation of the strain field and are readily integrated with current technology facilitating a path from lab bench to application. In this study, we use graphene as our prototypical 2D material, and determine strain via micro-Raman spectroscopy making extensive use of graphene's well-characterized phonon strain response. We report on the strength of various techniques for affixing graphene to MEMS, and investigate the role of surface morphology and chemistry in creating a high friction interface capable of inducing large strain. This work is supported by NSF DMR Grant 1411008, and author J. Christopher thanks the NDSEG program for its support.

The role of creep in the time-dependent resistance of Ohmic gold contacts in radio frequency microelectromechanical system devices

NASA Astrophysics Data System (ADS)

Rezvanian, O.; Brown, C.; Zikry, M. A.; Kingon, A. I.; Krim, J.; Irving, D. L.; Brenner, D. W.

2008-07-01

It is shown that measured and calculated time-dependent electrical resistances of closed gold Ohmic switches in radio frequency microelectromechanical system (rf-MEMS) devices are well described by a power law that can be derived from a single asperity creep model. The analysis reveals that the exponent and prefactor in the power law arise, respectively, from the coefficient relating creep rate to applied stress and the initial surface roughness. The analysis also shows that resistance plateaus are not, in fact, limiting resistances but rather result from the small coefficient in the power law. The model predicts that it will take a longer time for the contact resistance to attain a power law relation with each successive closing of the switch due to asperity blunting. Analysis of the first few seconds of the measured resistance for three successive openings and closings of one of the MEMS devices supports this prediction. This work thus provides guidance toward the rational design of Ohmic contacts with enhanced reliabilities by better defining variables that can be controlled through material selection, interface processing, and switch operation.

Piezoelectric microelectromechanical resonant sensors for chemical and biological detection.

PubMed

Pang, Wei; Zhao, Hongyuan; Kim, Eun Sok; Zhang, Hao; Yu, Hongyu; Hu, Xiaotang

2012-01-07

Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors (with specific coating layers) that enable selective and label-free detection of biological events in real time. These label-free technologies have recently garnered significant attention for their sensitive and quantitative multi-parameter analysis of biological systems. Since piezoelectric MEMS resonant sensors do more than transform analyte mass or thickness into an electrical signal (e.g., frequency and impedance), special attention must be paid to their potential beyond microweighing, such as measuring elastic and viscous properties, and several types of sensors currently under development operate at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode, flexural mode, etc.). In this review, we provide an overview of recent developments in micromachined resonant sensors and activities relating to biochemical interfaces for acoustic sensors.

Evaluation of a Programmable Voltage-Controlled MEMS Oscillator, Type SiT3701, Over a Wide Temperature Range

NASA Technical Reports Server (NTRS)

Patterson, Richard; Hammoud, Ahmad

2009-01-01

Semiconductor chips based on MEMS (Micro-Electro-Mechanical Systems) technology, such as sensors, transducers, and actuators, are becoming widely used in today s electronics due to their high performance, low power consumption, tolerance to shock and vibration, and immunity to electro-static discharge. In addition, the MEMS fabrication process allows for the miniaturization of individual chips as well as the integration of various electronic circuits into one module, such as system-on-a-chip. These measures would simplify overall system design, reduce parts count and interface, improve reliability, and reduce cost; and they would meet requirements of systems destined for use in space exploration missions. In this work, the performance of a recently-developed MEMS voltage-controlled oscillator was evaluated under a wide temperature range. Operation of this new commercial-off-the-shelf (COTS) device was also assessed under thermal cycling to address some operational conditions of the space environment

Quaternion-Based Unscented Kalman Filter for Accurate Indoor Heading Estimation Using Wearable Multi-Sensor System

PubMed Central

Yuan, Xuebing; Yu, Shuai; Zhang, Shengzhi; Wang, Guoping; Liu, Sheng

2015-01-01

Inertial navigation based on micro-electromechanical system (MEMS) inertial measurement units (IMUs) has attracted numerous researchers due to its high reliability and independence. The heading estimation, as one of the most important parts of inertial navigation, has been a research focus in this field. Heading estimation using magnetometers is perturbed by magnetic disturbances, such as indoor concrete structures and electronic equipment. The MEMS gyroscope is also used for heading estimation. However, the accuracy of gyroscope is unreliable with time. In this paper, a wearable multi-sensor system has been designed to obtain the high-accuracy indoor heading estimation, according to a quaternion-based unscented Kalman filter (UKF) algorithm. The proposed multi-sensor system including one three-axis accelerometer, three single-axis gyroscopes, one three-axis magnetometer and one microprocessor minimizes the size and cost. The wearable multi-sensor system was fixed on waist of pedestrian and the quadrotor unmanned aerial vehicle (UAV) for heading estimation experiments in our college building. The results show that the mean heading estimation errors are less 10° and 5° to multi-sensor system fixed on waist of pedestrian and the quadrotor UAV, respectively, compared to the reference path. PMID:25961384

A Robust Nonlinear Observer for Real-Time Attitude Estimation Using Low-Cost MEMS Inertial Sensors

PubMed Central

Guerrero-Castellanos, José Fermi; Madrigal-Sastre, Heberto; Durand, Sylvain; Torres, Lizeth; Muñoz-Hernández, German Ardul

2013-01-01

This paper deals with the attitude estimation of a rigid body equipped with angular velocity sensors and reference vector sensors. A quaternion-based nonlinear observer is proposed in order to fuse all information sources and to obtain an accurate estimation of the attitude. It is shown that the observer error dynamics can be separated into two passive subsystems connected in “feedback”. Then, this property is used to show that the error dynamics is input-to-state stable when the measurement disturbance is seen as an input and the error as the state. These results allow one to affirm that the observer is “robustly stable”. The proposed observer is evaluated in real-time with the design and implementation of an Attitude and Heading Reference System (AHRS) based on low-cost MEMS (Micro-Electro-Mechanical Systems) Inertial Measure Unit (IMU) and magnetic sensors and a 16-bit microcontroller. The resulting estimates are compared with a high precision motion system to demonstrate its performance. PMID:24201316

Advanced RF Front End Technology

NASA Technical Reports Server (NTRS)

Herman, M. I.; Valas, S.; Katehi, L. P. B.

2001-01-01

The ability to achieve low-mass low-cost micro/nanospacecraft for Deep Space exploration requires extensive miniaturization of all subsystems. The front end of the Telecommunication subsystem is an area in which major mass (factor of 10) and volume (factor of 100) reduction can be achieved via the development of new silicon based micromachined technology and devices. Major components that make up the front end include single-pole and double-throw switches, diplexer, and solid state power amplifier. JPL's Center For Space Microsystems - System On A Chip (SOAC) Program has addressed the challenges of front end miniaturization (switches and diplexers). Our objectives were to develop the main components that comprise a communication front end and enable integration in a single module that we refer to as a 'cube'. In this paper we will provide the latest status of our Microelectromechanical System (MEMS) switches and surface micromachined filter development. Based on the significant progress achieved we can begin to provide guidelines of the proper system insertion for these emerging technologies. Additional information is contained in the original extended abstract.

MEMS: Enabled Drug Delivery Systems.

PubMed

Cobo, Angelica; Sheybani, Roya; Meng, Ellis

2015-05-01

Drug delivery systems play a crucial role in the treatment and management of medical conditions. Microelectromechanical systems (MEMS) technologies have allowed the development of advanced miniaturized devices for medical and biological applications. This Review presents the use of MEMS technologies to produce drug delivery devices detailing the delivery mechanisms, device formats employed, and various biomedical applications. The integration of dosing control systems, examples of commercially available microtechnology-enabled drug delivery devices, remaining challenges, and future outlook are also discussed. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Microfabricated ion trap array

DOEpatents

Blain, Matthew G [Albuquerque, NM; Fleming, James G [Albuquerque, NM

2006-12-26

A microfabricated ion trap array, comprising a plurality of ion traps having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale ion traps to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The reduced electrode voltage enables integration of the microfabricated ion trap array with on-chip circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of the microfabricated ion trap array can be realized in truly field portable, handheld microanalysis systems.

Review of Polyimides Used in the Manufacturing of Micro Systems

NASA Technical Reports Server (NTRS)

Wilson, William C.; Atkinson, Gary M.

2007-01-01

Since their invention, polyimides have found numerous uses in MicroElectroMechanical Systems (MEMS) technology. Polyimides can act as photoresist, sacrificial layers, structural layers, and even as a replacement for silicon as the substrate during MEMS fabrication. They enable fabrication of both low and high aspect ratio devices. Polyimides have been used to fabricate expendable molds and reusable flexible molds. Development of a variety of devices that employ polyimides for sensor applications has occurred. Micro-robotic actuator applications include hinges, thermal actuators and residual stress actuators. Currently, polyimides are being used to create new sensors and devices for aerospace applications. This paper presents a review of some of the many uses of polyimides in the development of MEMS devices, including a new polyimide based MEMS fabrication process.

Proceedings of the International Conference on Integrated Micro/Nanotechnology for Space Applications

NASA Technical Reports Server (NTRS)

1995-01-01

The recent evolution of microelectronic technologies coupled with the growth of micro-electro-mechanical systems (MEMS) has had significant impact in the commercial sector. The focus of this conference was to anticipate and extend the incorporation of nano-electronics and MEMS into application specific integrated microinstruments (ASIM's) in space systems. Presentations ranged from mission application of nano-satellites to silicon micromachining for photonic applications.

Microelectromechanical reprogrammable logic device.

PubMed

Hafiz, M A A; Kosuru, L; Younis, M I

2016-03-29

In modern computing, the Boolean logic operations are set by interconnect schemes between the transistors. As the miniaturization in the component level to enhance the computational power is rapidly approaching physical limits, alternative computing methods are vigorously pursued. One of the desired aspects in the future computing approaches is the provision for hardware reconfigurability at run time to allow enhanced functionality. Here we demonstrate a reprogrammable logic device based on the electrothermal frequency modulation scheme of a single microelectromechanical resonator, capable of performing all the fundamental 2-bit logic functions as well as n-bit logic operations. Logic functions are performed by actively tuning the linear resonance frequency of the resonator operated at room temperature and under modest vacuum conditions, reprogrammable by the a.c.-driving frequency. The device is fabricated using complementary metal oxide semiconductor compatible mass fabrication process, suitable for on-chip integration, and promises an alternative electromechanical computing scheme.

Microelectromechanical reprogrammable logic device

PubMed Central

Hafiz, M. A. A.; Kosuru, L.; Younis, M. I.

2016-01-01

In modern computing, the Boolean logic operations are set by interconnect schemes between the transistors. As the miniaturization in the component level to enhance the computational power is rapidly approaching physical limits, alternative computing methods are vigorously pursued. One of the desired aspects in the future computing approaches is the provision for hardware reconfigurability at run time to allow enhanced functionality. Here we demonstrate a reprogrammable logic device based on the electrothermal frequency modulation scheme of a single microelectromechanical resonator, capable of performing all the fundamental 2-bit logic functions as well as n-bit logic operations. Logic functions are performed by actively tuning the linear resonance frequency of the resonator operated at room temperature and under modest vacuum conditions, reprogrammable by the a.c.-driving frequency. The device is fabricated using complementary metal oxide semiconductor compatible mass fabrication process, suitable for on-chip integration, and promises an alternative electromechanical computing scheme. PMID:27021295

Method for forming permanent magnets with different polarities for use in microelectromechanical devices

DOEpatents

Roesler, Alexander W [Tijeras, NM; Christenson, Todd R [Albuquerque, NM

2007-04-24

Methods are provided for forming a plurality of permanent magnets with two different north-south magnetic pole alignments for use in microelectromechanical (MEM) devices. These methods are based on initially magnetizing the permanent magnets all in the same direction, and then utilizing a combination of heating and a magnetic field to switch the polarity of a portion of the permanent magnets while not switching the remaining permanent magnets. The permanent magnets, in some instances, can all have the same rare-earth composition (e.g. NdFeB) or can be formed of two different rare-earth materials (e.g. NdFeB and SmCo). The methods can be used to form a plurality of permanent magnets side-by-side on or within a substrate with an alternating polarity, or to form a two-dimensional array of permanent magnets in which the polarity of every other row of the array is alternated.

Three-Dimensional Multiscale, Multistable, and Geometrically Diverse Microstructures with Tunable Vibrational Dynamics Assembled by Compressive Buckling.

PubMed

Ning, Xin; Wang, Heling; Yu, Xinge; Soares, Julio A N T; Yan, Zheng; Nan, Kewang; Velarde, Gabriel; Xue, Yeguang; Sun, Rujie; Dong, Qiyi; Luan, Haiwen; Lee, Chan Mi; Chempakasseril, Aditya; Han, Mengdi; Wang, Yiqi; Li, Luming; Huang, Yonggang; Zhang, Yihui; Rogers, John

2017-04-11

Microelectromechanical systems remain an area of significant interest in fundamental and applied research due to their wide ranging applications. Most device designs, however, are largely two-dimensional and constrained to only a few simple geometries. Achieving tunable resonant frequencies or broad operational bandwidths requires complex components and/or fabrication processes. The work presented here reports unusual classes of three-dimensional (3D) micromechanical systems in the form of vibratory platforms assembled by controlled compressive buckling. Such 3D structures can be fabricated across a broad range of length scales and from various materials, including soft polymers, monocrystalline silicon, and their composites, resulting in a wide scope of achievable resonant frequencies and mechanical behaviors. Platforms designed with multistable mechanical responses and vibrationally de-coupled constituent elements offer improved bandwidth and frequency tunability. Furthermore, the resonant frequencies can be controlled through deformations of an underlying elastomeric substrate. Systematic experimental and computational studies include structures with diverse geometries, ranging from tables, cages, rings, ring-crosses, ring-disks, two-floor ribbons, flowers, umbrellas, triple-cantilever platforms, and asymmetric circular helices, to multilayer constructions. These ideas form the foundations for engineering designs that complement those supported by conventional, microelectromechanical systems, with capabilities that could be useful in systems for biosensing, energy harvesting and others.

Modeling of an 8-12 GHz receiver front-end based on an in-line MEMS frequency discriminator

NASA Astrophysics Data System (ADS)

Chu, Chenlei; Liao, Xiaoping

2018-06-01

This paper focuses on the modeling of an 8-12 GHz RF (radio frequency) receiver front-end based on an in-line MEMS (microelectromechanical systems) frequency discriminator. Actually, the frequency detection is realized by measuring the output dc thermal voltage generated by the MEMS thermoelectric power sensor. Based on this thermal voltage, it has a great potential to tune the resonant frequency of the VCO (voltage controlled oscillator) in the RF receiver front-end application. The equivalent circuit model of the in-line frequency discriminator is established and the measurement verification is also implemented. Measurement and simulation results show that the output dc thermal voltage has a nearly linear relation with frequency. A new construction of RF receiver front-end is then obtained by connecting the in-line frequency discriminator with the voltage controlling port of VCO. Lastly, a systemic simulation is processed by computer-aided software and the real-time simulation waveform at each key point is observed clearly.

Surface-micromachined and high-aspect ratio electrostatic actuators for aeronautic and space applications: design and lifetime considerations

NASA Astrophysics Data System (ADS)

Vescovo, P.; Joseph, E.; Bourbon, G.; Le Moal, P.; Minotti, P.; Hibert, C.; Pont, G.

2003-09-01

This paper focuses on recent advances in the field of MEMS-based actuators and distributed microelectromechanical systems (MEMS). IC-processed actuators (e.g. actuators that are machined using integrated circuit batch processes) are expected to open a wide range of industrial applications on the near term. The most promising investigations deal with high-aspect ratio electric field driven microactuators suitable for use in numerous technical fields such as aeronautics and space industry. Because the silicon micromachining technology have the potential to integrate both mechanical components and control circuits within a single process, MEMS-based active control of microscopic and macroscopic structures appears to be one of the most promising challenges for the next decade. As a first step towards new generations of MEMS-based smart structures, recent investigations dealing with silicon mechanisms involving MEMS-based actuators are briefly discussed in this paper.

A fluidics-based impact sensor

PubMed Central

Takahashi, Daigo; Hara, Keisuke; Okano, Taiji

2018-01-01

Microelectromechanical systems (MEMS)-based high-performance accelerometers are ubiquitously used in various electronic devices. However, there is an existing need to detect physical impacts using low-cost devices with no electronic circuits or a battery. We designed and fabricated an impact sensor prototype using a commercial stereolithography apparatus that only consists of a plastic housing and working fluids. The sensor device responds to the instantaneous acceleration (impact) by deformation and pinch off of a water droplet that is suspended in oil in a sensor cavity. We tested the various geometrical and physical parameters of the impact sensor to identify their relations to threshold acceleration values. We show that the state diagram that is plotted against the dimensionless Archimedes and Bond numbers adequately describes the response of the proposed sensor. PMID:29634750

Micro-electro-mechanical systems (MEMS) and agile lensing-based modules for communications, sensing and signal processing

NASA Astrophysics Data System (ADS)

Reza, Syed Azer

This dissertation proposes the use of the emerging Micro-Electro-Mechanical Systems (MEMS) and agile lensing optical device technologies to design novel and powerful signal conditioning and sensing modules for advanced applications in optical communications, physical parameter sensing and RF/optical signal processing. For example, these new module designs have experimentally demonstrated exceptional features such as stable loss broadband operations and high > 60 dB optical dynamic range signal filtering capabilities. The first part of the dissertation describes the design and demonstration of digital MEMS-based signal processing modules for communication systems and sensor networks using the TI DLP (Digital Light Processing) technology. Examples of such modules include optical power splitters, narrowband and broadband variable fiber optical attenuators, spectral shapers and filters. Compared to prior works, these all-digital designs have advantages of repeatability, accuracy, and reliability that are essential for advanced communications and sensor applications. The next part of the dissertation proposes, analyzes and demonstrates the use of analog opto-fluidic agile lensing technology for sensor networks and test and measurement systems. Novel optical module designs for distance sensing, liquid level sensing, three-dimensional object shape sensing and variable photonic delay lines are presented and experimentally demonstrated. Compared to prior art module designs, the proposed analog-mode modules have exceptional performances, particularly for extreme environments (e.g., caustic liquids) where the free-space agile beam-based sensor provide remote non-contact access for physical sensing operations. The dissertation also presents novel modules involving hybrid analog-digital photonic designs that make use of the different optical device technologies to deliver the best features of both analog and digital optical device operations and controls. Digital controls are achieved through the use of the digital MEMS technology and analog controls are realized by employing opto-fluidic agile lensing technology and acousto-optic technology. For example, variable fiber-optic attenuators and spectral filters are proposed using the hybrid design. Compared to prior art module designs, these hybrid designs provide a higher module dynamic range and increased resolution that are critical in various advanced system applications. In summary, the dissertation shows the added power of hybrid optical designs using both the digital and analog photonic signal processing versus just all-digital or all-analog module designs.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si₃N₄ Bimorph Microcantilevers for Static Mode Sensing.

PubMed

Kang, Seok-Won; Fragala, Joe; Kim, Su-Ho; Banerjee, Debjyoti

2017-11-01

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si₃N₄ microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers.

Design and Electro-Thermo-Mechanical Behavior Analysis of Au/Si3N4 Bimorph Microcantilevers for Static Mode Sensing

PubMed Central

Kim, Su-Ho; Banerjee, Debjyoti

2017-01-01

This paper presents a design optimization method based on theoretical analysis and numerical calculations, using a commercial multi-physics solver (e.g., ANSYS and ESI CFD-ACE+), for a 3D continuous model, to analyze the bending characteristics of an electrically heated bimorph microcantilever. The results from the theoretical calculation and numerical analysis are compared with those measured using a CCD camera and magnification lenses for a chip level microcantilever array fabricated in this study. The bimorph microcantilevers are thermally actuated by joule heating generated by a 0.4 μm thin-film Au heater deposited on 0.6 μm Si3N4 microcantilevers. The initial deflections caused by residual stress resulting from the thermal bonding of two metallic layers with different coefficients of thermal expansion (CTEs) are additionally considered, to find the exact deflected position. The numerically calculated total deflections caused by electrical actuation show differences of 10%, on average, with experimental measurements in the operating current region (i.e., ~25 mA) to prevent deterioration by overheating. Bimorph microcantilevers are promising components for use in various MEMS (Micro-Electro-Mechanical System) sensing applications, and their deflection characteristics in static mode sensing are essential for detecting changes in thermal stress on the surface of microcantilevers. PMID:29104265

BioMEMS and Lab-on-a-Chip Course Education at West Virginia University

PubMed Central

Liu, Yuxin

2011-01-01

With the rapid growth of Biological/Biomedical MicroElectroMechanical Systems (BioMEMS) and microfluidic-based lab-on-a-chip (LOC) technology to biological and biomedical research and applications, demands for educated and trained researchers and technicians in these fields are rapidly expanding. Universities are expected to develop educational plans to address these specialized needs in BioMEMS, microfluidic and LOC science and technology. A course entitled BioMEMS and Lab-on-a-Chip was taught recently at the senior undergraduate and graduate levels in the Department of Computer Science and Electrical Engineering at West Virginia University (WVU). The course focused on the basic principles and applications of BioMEMS and LOC technology to the areas of biomedicine, biology, and biotechnology. The course was well received and the enrolled students had diverse backgrounds in electrical engineering, material science, biology, mechanical engineering, and chemistry. Student feedback and a review of the course evaluations indicated that the course was effective in achieving its objectives. Student presentations at the end of the course were a highlight and a valuable experience for all involved. The course proved successful and will continue to be offered regularly. This paper provides an overview of the course as well as some development and future improvements. PMID:25586697

Aerospace Sensor Systems: From Sensor Development To Vehicle Application

NASA Technical Reports Server (NTRS)

Hunter, Gary W.

2008-01-01

This paper presents an overview of years of sensor system development and application for aerospace systems. The emphasis of this work is on developing advanced capabilities for measurement and control of aeropropulsion and crew vehicle systems as well as monitoring the safety of those systems. Specific areas of work include chemical species sensors, thin film thermocouples and strain gages, heat flux gages, fuel gages, SiC based electronic devices and sensors, space qualified electronics, and MicroElectroMechanical Systems (MEMS) as well as integrated and multifunctional sensor systems. Each sensor type has its own technical challenges related to integration and reliability in a given application. The general approach has been to develop base sensor technology using microfabrication techniques, integrate sensors with "smart" hardware and software, and demonstrate those systems in a range of aerospace applications. Descriptions of the sensor elements, their integration into sensors systems, and examples of sensor system applications will be discussed. Finally, suggestions related to the future of sensor technology will be given. It is concluded that smart micro/nano sensor technology can revolutionize aerospace applications, but significant challenges exist in maturing the technology and demonstrating its value in real-life applications.

Deformable Mirrors Capture Exoplanet Data, Reflect Lasers

NASA Technical Reports Server (NTRS)

2014-01-01

To image and characterize exoplanets, Goddard Space Flight Center turned to deformable mirrors (DMs). Berkeley, California-based Iris AO, Inc. worked with Goddard through the SBIR program to improve the company’s microelectromechanical DMs, which are now being evaluated and used for biological research, industrial applications, and could even be used by drug manufacturers.

Electrostatic micromembrane actuator arrays as motion generator

NASA Astrophysics Data System (ADS)

Wu, X. T.; Hui, J.; Young, M.; Kayatta, P.; Wong, J.; Kennith, D.; Zhe, J.; Warde, C.

2004-05-01

A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems (MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10-200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMS mirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.

How merging droplets jump off a superhydrophobic surface: Measurements and model

NASA Astrophysics Data System (ADS)

Mouterde, Timothée; Nguyen, Thanh-Vinh; Takahashi, Hidetoshi; Clanet, Christophe; Shimoyama, Isao; Quéré, David

2017-11-01

We investigate how drops merging on a nonwettable surface jump off this surface, for both symmetric and asymmetric coalescences. For this purpose, we design and build a microelectromechanical system sensor able to quantify forces down to the micro-Newton scale at a high acquisition rate (200 kHz). Using this device, we perform direct force measurements of self-propelled droplets coupled to high-speed imaging. Experimental data show that the total momentum of the drop after coalescence mainly depends on the size of the smaller drop. Exploiting this finding, we quantitatively predict the takeoff speed of jumping drop pairs and show how to correct the usual argument based on energy conservation.

Tunable vertical cavity surface emitting lasers for use in the near infrared biological window

NASA Astrophysics Data System (ADS)

Kitsmiller, Vincent J.; Dummer, Matthew; Johnson, Klein; O'Sullivan, Thomas D.

2018-02-01

We present a near-infrared tunable vertical cavity surface emitting laser (VCSEL) based upon a unique electrothermally tunable microelectromechanical systems (MEMS) topside mirror designed for tissue imaging and sensing. At room temperature, the laser is tunable from 769-782nm with single mode CW output and a peak output power of 1.3mW. We show that the tunable VCSEL is suitable for use in frequency domain diffuse optical spectroscopy by measuring the optical properties of a tissue-simulating phantom over the tunable range. These results indicate that tunable VCSELs may be an attractive choice to enable high spectral resolution optical sensing in a wearable format.

MEMSlab: A Practical MEMS Course for the Fabrication, Packaging, and Testing of a Single-Axis Accelerometer

ERIC Educational Resources Information Center

Grundbacher, R.; Hoetzel, J. E.; Hierold, C.

2009-01-01

A microelectro-mechanical systems (MEMS) laboratory course (MEMSlab) in the Mechanical and Process Engineering Department at the Swiss Federal Institute of Technology (ETH Zurich), is presented. The course has been taught for four years and has been attended primarily by Master's students from mechanical and electrical engineering; since fall…

In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis

NASA Astrophysics Data System (ADS)

Schifferle, Andreas; Dommann, Alex; Neels, Antonia

2017-12-01

New methods are needed in microsystems technology for evaluating microelectromechanical systems (MEMS) because of their reduced size. The assessment and characterization of mechanical and structural relations of MEMS are essential to assure the long-term functioning of devices, and have a significant impact on design and fabrication.

Repeatable Manufacture of Wings for Flapping Wing Micro Air Vehicles Using Microelectromechanical System (MEMS) Fabrication Techniques

DTIC Science & Technology

2011-03-01

properties, but would be very difficult to adapt to a MEMS fabrication process. Nitinol was also considered as a structural material for its...such as iron, carbon, hydrogen and oxygen(13). Nitinol was also considered for these wings, but the expense and lead time was too great. Aside

Artificial Cochlea Design Using Micro-Electro-Mechanical Systems

DTIC Science & Technology

1996-12-17

FIGURE 2-9 - BLOCK DIAGRAM OF THE KATE’S MODEL ................................................ 2-13 FIGURE 2-10 -- COCHLEAR TUNING CURVES FOR KATES MODEL...2-14 FIGURE 2-11 - TUNING CURVE OF A CAT’S COCHLEA .................................................... 2-15...FIGURE 2-12 - FREQUENCY RESPONSE CURVES OF THE VLSI IMPLEMENTATIONS OF THE AN A LO G CO CH LEA

Differential Scanning Calorimetry Techniques: Applications in Biology and Nanoscience

PubMed Central

Gill, Pooria; Moghadam, Tahereh Tohidi; Ranjbar, Bijan

2010-01-01

This paper reviews the best-known differential scanning calorimetries (DSCs), such as conventional DSC, microelectromechanical systems-DSC, infrared-heated DSC, modulated-temperature DSC, gas flow-modulated DSC, parallel-nano DSC, pressure perturbation calorimetry, self-reference DSC, and high-performance DSC. Also, we describe here the most extensive applications of DSC in biology and nanoscience. PMID:21119929

Design, Fabrication, and Characterization of a Microelectromechanical Directional Microphone

DTIC Science & Technology

2011-06-01

7. PERFORMING ORGANIZATION NAME(S) AND ADDRESS(ES) 8. PERFORMING ORGANIZATION REPORT NUMBER 9. SPONSORING/MONITORING AGENCY NAME(S) AND ADDRESS(ES...Figure 5.2 SOIC packaging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38 Figure 5.3 Laboratory setup...Mean Squared SOC System-On-Chip SOIC Small Outline Integrated Circuit SOIMUMPS Silicon-On-Insulator Multi-User MEMS Process SPL Sound Pressure Level

Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting

PubMed Central

2011-01-01

Cubic silicon carbide (SiC) is an extremely hard and brittle material having unique blend of material properties which makes it suitable candidate for microelectromechanical systems and nanoelectromechanical systems applications. Although, SiC can be machined in ductile regime at nanoscale through single-point diamond turning process, the root cause of the ductile response of SiC has not been understood yet which impedes significant exploitation of this ceramic material. In this paper, molecular dynamics simulation has been carried out to investigate the atomistic aspects of ductile response of SiC during nanometric cutting process. Simulation results show that cubic SiC undergoes sp3-sp2 order-disorder transition resulting in the formation of SiC-graphene-like substance with a growth rate dependent on the cutting conditions. The disorder transition of SiC causes the ductile response during its nanometric cutting operations. It was further found out that the continuous abrasive action between the diamond tool and SiC causes simultaneous sp3-sp2 order-disorder transition of diamond tool which results in graphitization of diamond and consequent tool wear. PMID:22078069

Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting.

PubMed

Goel, Saurav; Luo, Xichun; Reuben, Robert L; Rashid, Waleed Bin

2011-11-11

Cubic silicon carbide (SiC) is an extremely hard and brittle material having unique blend of material properties which makes it suitable candidate for microelectromechanical systems and nanoelectromechanical systems applications. Although, SiC can be machined in ductile regime at nanoscale through single-point diamond turning process, the root cause of the ductile response of SiC has not been understood yet which impedes significant exploitation of this ceramic material. In this paper, molecular dynamics simulation has been carried out to investigate the atomistic aspects of ductile response of SiC during nanometric cutting process. Simulation results show that cubic SiC undergoes sp3-sp2 order-disorder transition resulting in the formation of SiC-graphene-like substance with a growth rate dependent on the cutting conditions. The disorder transition of SiC causes the ductile response during its nanometric cutting operations. It was further found out that the continuous abrasive action between the diamond tool and SiC causes simultaneous sp3-sp2 order-disorder transition of diamond tool which results in graphitization of diamond and consequent tool wear.

FPGA Control System for the Automated Test of Microshutters

NASA Technical Reports Server (NTRS)

Lyness, Eric; Rapchun, David A.; Moseley, S. Harvey

2008-01-01

The James Webb Space Telescope, scheduled to replace the Hubble in 2013, must simultaneously observe hundreds of faint galaxies. This requirement has led to the development of a programmable transmission mask which can be adapted to admit light with arbitrary pattern of galaxies into its spectrograph. This programmable mask will contain a large array of micro-electromechanical (MEMs) devices called MicroShutters. These microscopic shutters physically open and close like the shutter on a camera, except each shutter is microscopic in size and an array 365 by 171 is used to select the objects under spectroscopic observation at a given time, and to block the unwanted background light from other areas. NASA developed and is currently refining the exceptionally difficult process of manufacturing these shutters. This paper describes how the authors used LabVIEW FPGA and a reconfigurable I/O board to control the shutters in a test chamber and how the flexibility of the system allows us to continue to modify the control algorithms as NASA optimizes the performance of the MicroShutter arrays.

FPGA Control System for the Automated Test of MicroShutters

NASA Technical Reports Server (NTRS)

Lyness, Eric; Rapchun, David A.; Moseley, S. Harvey

2008-01-01

The James Webb Space Telescope, scheduled to replace the Hubble in 2013, must simultaneously observe hundreds of faint galaxies. This requirement has led to the development of a programmable transmission mask which can be adapted to admit light from an arbitrary pattern of galaxies into its spectrograph. This programmable mask will contain a large array of micro-electromechanical (MEMs) devices called MicroShutters. These microscopic shutters physically open and close like the shutter on a camera, except each shutter is microscopic in size and an array 365 by 171 is used to select the objects under spectroscopic observation at a given time, and to block the unwanted background light from other areas. NASA developed and is currently refining the exceptionally difficult process of manufacturing these shutters. This paper describes how the authors used LabVIEW FPGA and a reconfigurable I/O board to control the shutters in a test chamber and how the flexibility of the system allows us to continue to modify the control algorithms as NASA optimizes the performance of the MicroShutter arrays.

Structures and Techniques For Implementing and Packaging Complex, Large Scale Microelectromechanical Systems Using Foundry Fabrication Processes.

DTIC Science & Technology

1996-06-01

switches 5-43 Figure 5-27. Mechanical interference between ’Pull Spring’ devices 5-45 Figure 5-28. Array of LIGA mechanical relay switches 5-49...like coating DM Direct metal interconnect technique DMD ™ Digital Micromirror Device EDP Ethylene, diamine, pyrocatechol and water; silicon anisotropic...mechanical systems MOSIS MOS Implementation Service PGA Pin grid array, an electronic die package PZT Lead-zirconate-titanate LIGA Lithographie

Advanced adaptive optics technology development

NASA Astrophysics Data System (ADS)

Olivier, Scot S.

2002-02-01

The NSF Center for Adaptive Optics (CfAO) is supporting research on advanced adaptive optics technologies. CfAO research activities include development and characterization of micro-electro-mechanical systems (MEMS) deformable mirror (DM) technology, as well as development and characterization of high-resolution adaptive optics systems using liquid crystal (LC) spatial light modulator (SLM) technology. This paper presents an overview of the CfAO advanced adaptive optics technology development activities including current status and future plans.

Microfabricated diffusion source

DOEpatents

Oborny, Michael C [Albuquerque, NM; Frye-Mason, Gregory C [Cedar Crest, NM; Manginell, Ronald P [Albuquerque, NM

2008-07-15

A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.

On-Orbit, Immuno-Based, Label-Free White Blood Cell Counting System with Microelectromechanical Sensor Technology (OILWBCS-MEMS)

NASA Technical Reports Server (NTRS)

Edmonds, Jessica

2015-01-01

Aurora Flight Sciences, in partnership with Draper Laboratory, has developed a miniaturized system to count white blood cells in microgravity environments. The system uses MEMS technology to simultaneously count total white blood cells, the five white blood cell differential subgroups, and various lymphocyte subtypes. The OILWBCS-MEMS detection technology works by immobilizing an array of white blood cell-specific antibodies on small, gold-coated membranes. When blood flows across the membranes, specific cells' surface protein antigens bind to their corresponding antibodies. This binding can be measured and correlated to cell counts. In Phase I, the partners demonstrated surface chemistry sensitivity and specificity for total white blood cells and two lymphocyte subtypes. In Phase II, a functional prototype demonstrated end-to-end operation. This rugged, miniaturized device requires minimal blood sample preparation and will be useful for both space flight and terrestrial applications.

WISDOM: wheelchair inertial sensors for displacement and orientation monitoring

NASA Astrophysics Data System (ADS)

Pansiot, J.; Zhang, Z.; Lo, B.; Yang, G. Z.

2011-10-01

Improved wheelchair design in recent years has significantly increased the mobility of people with disabilities, which has also enhanced the competitive advantage of wheelchair sports. For the latter, detailed assessment of biomechanical factors influencing individual performance and team tactics requires real-time wireless sensing and data modelling. In this paper, we propose the use of a miniaturized wireless wheel-mounted inertial sensor for wheelchair motion monitoring and tracking in an indoor sport environment. Based on a combined use of 3D microelectromechanical system (MEMS) gyroscopes and 2D MEMS accelerometers, the proposed system provides real-time velocity, heading, ground distance covered and motion trajectory of the wheelchair across the sports court. The proposed system offers a number of advantages compared to existing platforms in terms of size, weight and ease of installation. Beyond sport applications, it also has important applications for training and rehabilitation for people with disabilities.

Ion Chromatography-on-a-chip for Water Quality Analysis

NASA Technical Reports Server (NTRS)

Kidd, R. D.; Noell, A.; Kazarians, G.; Aubrey, A. D.; Scianmarello, N.; Tai, Y.-C.

2015-01-01

We report progress towards developing a Micro-Electro-Mechanical Systems (MEMS)- based ion chromatograph (IC) for crewed spacecraft water analysis. This IC-chip is an offshoot of a NASA-funded effort to produce a high performance liquid chromatograph (HPLC)-chip. This HPLC-chip system would require a desalting (i.e. ion chromatography) step. The complete HPLC instrument consists of the Jet Propulsion Labortory's (JPL's) quadrupole ion trap mass spectrometer integrated with a state-of-the-art MEMS liquid chromatograph (LC) system developed by the California Institute of Technology's (Caltech's) Micromachining Laboratory. The IC version of the chip consist of an electrolysis-based injector, a separation column, two electrolysis pumps for gradient generation, mixer, and a built-in conductivity detector. The HPLC version of the chip also includes a nanospray tip. The low instrument mass, coupled with its high analytical capabilities, makes the LC chip ideally suitable for wide range of applications such as trace contaminant, inorganic analytical science and, when coupled to a mass spectrometer, a macromolecular detection system for either crewed space exploration vehicles or robotic planetary missions.

A fast and low-power microelectromechanical system-based non-volatile memory device

PubMed Central

Lee, Sang Wook; Park, Seung Joo; Campbell, Eleanor E. B.; Park, Yung Woo

2011-01-01

Several new generation memory devices have been developed to overcome the low performance of conventional silicon-based flash memory. In this study, we demonstrate a novel non-volatile memory design based on the electromechanical motion of a cantilever to provide fast charging and discharging of a floating-gate electrode. The operation is demonstrated by using an electromechanical metal cantilever to charge a floating gate that controls the charge transport through a carbon nanotube field-effect transistor. The set and reset currents are unchanged after more than 11 h constant operation. Over 500 repeated programming and erasing cycles were demonstrated under atmospheric conditions at room temperature without degradation. Multinary bit programming can be achieved by varying the voltage on the cantilever. The operation speed of the device is faster than a conventional flash memory and the power consumption is lower than other memory devices. PMID:21364559

Novel On-wafer Radiation Pattern Measurement Technique for MEMS Actuator Based Reconfigurable Patch Antennas

NASA Technical Reports Server (NTRS)

Simons, Rainee N.

2002-01-01

The paper presents a novel on-wafer, antenna far field pattern measurement technique for microelectromechanical systems (MEMS) based reconfigurable patch antennas. The measurement technique significantly reduces the time and the cost associated with the characterization of printed antennas, fabricated on a semiconductor wafer or dielectric substrate. To measure the radiation patterns, the RF probe station is modified to accommodate an open-ended rectangular waveguide as the rotating linearly polarized sampling antenna. The open-ended waveguide is attached through a coaxial rotary joint to a Plexiglas(Trademark) arm and is driven along an arc by a stepper motor. Thus, the spinning open-ended waveguide can sample the relative field intensity of the patch as a function of the angle from bore sight. The experimental results include the measured linearly polarized and circularly polarized radiation patterns for MEMS-based frequency reconfigurable rectangular and polarization reconfigurable nearly square patch antennas, respectively.

Development of micro-electromechanical system (MEMS) cochlear biomodel

NASA Astrophysics Data System (ADS)

Ngelayang, Thailis Bounya Anak; Latif, Rhonira

2015-05-01

Human cochlear is undeniably one of the most amazing organs in human body. The functional mechanism is very unique in terms of its ability to convert the sound waves in the form of mechanical vibrations into the electrical nerve impulses. It is known that the normal human auditory system can perceive the audible frequency range between 20 Hz to 20 kHz. Scientists have conducted several researches trying to build the artificial basilar membrane in the human cochlea (cochlear biomodel). Micro-electromechanical system (MEMS) is one of the potential inventions that have the ability to mimic the active behavior of the basilar membrane. In this paper, an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency has been proposed. An array of bridge bridge beams with 0.5 µm thickness and length varying from 200 µm to 2000 µm have been designed operate within the audible frequency range. In the bridge beams design, aluminium (Al), copper (Cu), tantalum (Ta) and platinum (Pt) have considered as the material for the bridge beam structure. From the finite element (FE) and lumped element (LE) models of the MEMS bridge beams, platinum has been found to be the best material for the cochlear biomodel design, closely mimicking the basilar membrane.

Development of micro-electromechanical system (MEMS) cochlear biomodel

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ngelayang, Thailis Bounya Anak; Latif, Rhonira

Human cochlear is undeniably one of the most amazing organs in human body. The functional mechanism is very unique in terms of its ability to convert the sound waves in the form of mechanical vibrations into the electrical nerve impulses. It is known that the normal human auditory system can perceive the audible frequency range between 20 Hz to 20 kHz. Scientists have conducted several researches trying to build the artificial basilar membrane in the human cochlea (cochlear biomodel). Micro-electromechanical system (MEMS) is one of the potential inventions that have the ability to mimic the active behavior of the basilar membrane. Inmore » this paper, an array of MEMS bridge beams that are mechanically sensitive to the perceived audible frequency has been proposed. An array of bridge bridge beams with 0.5 µm thickness and length varying from 200 µm to 2000 µm have been designed operate within the audible frequency range. In the bridge beams design, aluminium (Al), copper (Cu), tantalum (Ta) and platinum (Pt) have considered as the material for the bridge beam structure. From the finite element (FE) and lumped element (LE) models of the MEMS bridge beams, platinum has been found to be the best material for the cochlear biomodel design, closely mimicking the basilar membrane.« less

Particle Filter with Novel Nonlinear Error Model for Miniature Gyroscope-Based Measurement While Drilling Navigation

PubMed Central

Li, Tao; Yuan, Gannan; Li, Wang

2016-01-01

The derivation of a conventional error model for the miniature gyroscope-based measurement while drilling (MGWD) system is based on the assumption that the errors of attitude are small enough so that the direction cosine matrix (DCM) can be approximated or simplified by the errors of small-angle attitude. However, the simplification of the DCM would introduce errors to the navigation solutions of the MGWD system if the initial alignment cannot provide precise attitude, especially for the low-cost microelectromechanical system (MEMS) sensors operated in harsh multilateral horizontal downhole drilling environments. This paper proposes a novel nonlinear error model (NNEM) by the introduction of the error of DCM, and the NNEM can reduce the propagated errors under large-angle attitude error conditions. The zero velocity and zero position are the reference points and the innovations in the states estimation of particle filter (PF) and Kalman filter (KF). The experimental results illustrate that the performance of PF is better than KF and the PF with NNEM can effectively restrain the errors of system states, especially for the azimuth, velocity, and height in the quasi-stationary condition. PMID:26999130

Particle Filter with Novel Nonlinear Error Model for Miniature Gyroscope-Based Measurement While Drilling Navigation.

PubMed

Li, Tao; Yuan, Gannan; Li, Wang

2016-03-15

The derivation of a conventional error model for the miniature gyroscope-based measurement while drilling (MGWD) system is based on the assumption that the errors of attitude are small enough so that the direction cosine matrix (DCM) can be approximated or simplified by the errors of small-angle attitude. However, the simplification of the DCM would introduce errors to the navigation solutions of the MGWD system if the initial alignment cannot provide precise attitude, especially for the low-cost microelectromechanical system (MEMS) sensors operated in harsh multilateral horizontal downhole drilling environments. This paper proposes a novel nonlinear error model (NNEM) by the introduction of the error of DCM, and the NNEM can reduce the propagated errors under large-angle attitude error conditions. The zero velocity and zero position are the reference points and the innovations in the states estimation of particle filter (PF) and Kalman filter (KF). The experimental results illustrate that the performance of PF is better than KF and the PF with NNEM can effectively restrain the errors of system states, especially for the azimuth, velocity, and height in the quasi-stationary condition.

Bioanalysis in microfluidic devices.

PubMed

Khandurina, Julia; Guttman, András

2002-01-18

Microfabricated bioanalytical devices (also referred to as laboratory-on-a-chip or micro-TAS) offer highly efficient platforms for simultaneous analysis of a large number of biologically important molecules, possessing great potential for genome, proteome and metabolome studies. Development and implementation of microfluidic-based bioanalytical tools involves both established and evolving technologies, including microlithography, micromachining, micro-electromechanical systems technology and nanotechnology. This article provides an overview of the latest developments in the key device subject areas and the basic interdisciplinary technologies. Important aspects of DNA and protein analysis, interfacing issues and system integration are all thoroughly discussed, along with applications for this novel "synergized" technology in high-throughput separations of biologically important molecules. This review also gives a better understanding of how to utilize these technologies as well as to provide appropriate technical solutions to problems perceived as being more fundamental.

Demodulation algorithm for optical fiber F-P sensor.

PubMed

Yang, Huadong; Tong, Xinglin; Cui, Zhang; Deng, Chengwei; Guo, Qian; Hu, Pan

2017-09-10

The demodulation algorithm is very important to improving the measurement accuracy of a sensing system. In this paper, the variable step size hill climbing search method will be initially used for the optical fiber Fabry-Perot (F-P) sensing demodulation algorithm. Compared with the traditional discrete gap transformation demodulation algorithm, the computation is greatly reduced by changing step size of each climb, which could achieve nano-scale resolution, high measurement accuracy, high demodulation rates, and large dynamic demodulation range. An optical fiber F-P pressure sensor based on micro-electro-mechanical system (MEMS) has been fabricated to carry out the experiment, and the results show that the resolution of the algorithm can reach nano-scale level, the sensor's sensitivity is about 2.5  nm/KPa, which is similar to the theoretical value, and this sensor has great reproducibility.

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation.

PubMed

Kwon, Hyukjin J; Seok, Seyeong; Lim, Geunbae

2017-11-18

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope. In this study, a MEMS vibratory gyroscope is analyzed based on the system dynamic modeling; thus, it can be mathematically expressed and integrated into a circuit simulator. A behavioral simulation of the entire system was conducted to prove the self-oscillation and angular-rate detection and to determine the circuit parameters to be optimized. From the simulation, the operating characteristic according to the vacuum pressure and scale factor was obtained, which indicated similar trends compared with those of the experimental results. The simulation method presented in this paper can be generalized to a wide range of MEMS devices.

Review on the Modeling of Electrostatic MEMS

PubMed Central

Chuang, Wan-Chun; Lee, Hsin-Li; Chang, Pei-Zen; Hu, Yuh-Chung

2010-01-01

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices. PMID:22219707

Catalyst for microelectromechanical systems microreactors

DOEpatents

Morse, Jeffrey D [Martinez, CA; Sopchak, David A [Livermore, CA; Upadhye, Ravindra S [Pleasanton, CA; Reynolds, John G [San Ramon, CA; Satcher, Joseph H [Patterson, CA; Gash, Alex E [Brentwood, CA

2010-06-29

A microreactor comprising a silicon wafer, a multiplicity of microchannels in the silicon wafer, and a catalyst coating the microchannels. In one embodiment the catalyst coating the microchannels comprises a nanostructured material. In another embodiment the catalyst coating the microchannels comprises an aerogel. In another embodiment the catalyst coating the microchannels comprises a solgel. In another embodiment the catalyst coating the microchannels comprises carbon nanotubes.

Catalyst for microelectromechanical systems microreactors

DOEpatents

Morse, Jeffrey D [Martinez, CA; Sopchak, David A [Livermore, CA; Upadhye, Ravindra S [Pleasanton, CA; Reynolds, John G [San Ramon, CA; Satcher, Joseph H [Patterson, CA; Gash, Alex E [Brentwood, CA

2011-11-15

A microreactor comprising a silicon wafer, a multiplicity of microchannels in the silicon wafer, and a catalyst coating the microchannels. In one embodiment the catalyst coating the microchannels comprises a nanostructured material. In another embodiment the catalyst coating the microchannels comprises an aerogel. In another embodiment the catalyst coating the microchannels comprises a solgel. In another embodiment the catalyst coating the microchannels comprises carbon nanotubes.

MEMS Reliability Assurance Activities at JPL

NASA Technical Reports Server (NTRS)

Kayali, S.; Lawton, R.; Stark, B.

2000-01-01

An overview of Microelectromechanical Systems (MEMS) reliability assurance and qualification activities at JPL is presented along with the a discussion of characterization of MEMS structures implemented on single crystal silicon, polycrystalline silicon, CMOS, and LIGA processes. Additionally, common failure modes and mechanisms affecting MEMS structures, including radiation effects, are discussed. Common reliability and qualification practices contained in the MEMS Reliability Assurance Guideline are also presented.

Insulator Charging in RF MEMS Capacitive Switches

DTIC Science & Technology

2005-06-01

and Simulations,” Journal of Microelectromechanical Systems, 8: 208-217 (June 1999). 5. Neaman , Donald. Semiconductor Physics & Devices. Boston...227-230 (2001). 5. Sze, S.M. Semiconductor Devices: Physics and Technology. New York: Wiley, 1985. 6. Neaman , Donald A. Semiconductor Physics...Radiation Response of Hafnium-Silicate Capacitors,” IEEE Transactions on Nuclear Science, 49: 3191-3196 (December 2002). 3. Neaman , D.A

Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material

DTIC Science & Technology

2009-09-01

exploding foil initiator ( EFI ) type fuzes are being explored to...Acronyms Au gold Cr chromium Cu copper EFI exploding foil initiator BOE buffered oxide etch MEMS microelectromechanical systems RIE reactive ion...Patterning of Thick Parylene Films by Oxygen Plasma for Application as Exploding Foil Initiator Flyer Material by Eugene Zakar and Michael

MEMS Reliability Assurance Guidelines for Space Applications

NASA Technical Reports Server (NTRS)

Stark, Brian (Editor)

1999-01-01

This guide is a reference for understanding the various aspects of microelectromechanical systems, or MEMS, with an emphasis on device reliability. Material properties, failure mechanisms, processing techniques, device structures, and packaging techniques common to MEMS are addressed in detail. Design and qualification methodologies provide the reader with the means to develop suitable qualification plans for the insertion of MEMS into the space environment.

Ultra-Tunable Micro-Power Converters

DTIC Science & Technology

2008-12-01

These advantages come at the expense of potentially difficult to integrate magnetic materials and magnetic property limitations/losses that may...that add greatly to the size/weight of a system (or whose properties /efficiency may be compromised to accommodate space constraints). Given the...thin film magnetic core (such as NiFe ). “Taps” are periodically provided through a series of microelectromechanical (MEMS) switches. In the example

Development of Optimized Piezoelectric Bending Actuators for Use in an Insect Sized Flapping Wing Micro Air Vehicle

DTIC Science & Technology

2013-03-01

of microelectromechanical systems (MEMS) [37], and the epoxy in uncured pre-impregnated ( prepreg ) carbon fiber has also been used in bending [42] and...to assemble due to challenges in working with the carbon fiber. When the epoxy in the prepreg carbon fiber is used as a bonding agent, there is no

A Laboratory Project on the Theory, Fabrication, and Characterization of a Silicon-on-Insulator Micro-Comb Drive Actuator with Fixed-Fixed Beams

ERIC Educational Resources Information Center

Abbas, K.; Leseman, Z. C.

2012-01-01

A laboratory course on the theory, fabrication, and characterization of microelectromechanical systems (MEMS) devices for a multidisciplinary audience of graduate students at the University of New Mexico, Albuquerque, has been developed. Hands-on experience in the cleanroom has attracted graduate students from across the university's engineering…

Bimaterial Microcantilevers as a Hybrid Sensing Platform

DTIC Science & Technology

2008-01-01

cantilevers are immersed in dilute solution (milli molar) of desired organic molecule (e.g., alkanethiols) in aqueous or organic solvent (e.g., water... active layers, and some of the im- portant applications. Emphasizing the material design aspects, the review underscores the most important findings... active sensing materials in microelectromechanical systems (MEMS), soft matter-inclusive sensors bring a desir- able diversity in signal transduction

Tunable Patch Antennas Using Microelectromechanical Systems

DTIC Science & Technology

2011-05-11

Figure 28, was selected as most suitable to this application. MetalMUMPs is a surface micromachining process with polysilicon , silicon nitride, nickel...yields. MEMS Variable Capacitor Design The MEMS capacitors reported here were an original design that features nickel and polysilicon layers as...the movable plates of a variable parallel plate capacitor. The polysilicon layer was embedded in silicon nitride for electrical isolation and suspended

Advanced Interconnect Roadmap for Space Applications

NASA Technical Reports Server (NTRS)

Galbraith, Lissa

1999-01-01

This paper presents the NASA electronic parts and packaging program for space applications. The topics include: 1) Forecasts; 2) Technology Challenges; 3) Research Directions; 4) Research Directions for Chip on Board (COB); 5) Research Directions for HDPs: Multichip Modules (MCMs); 6) Research Directions for Microelectromechanical systems (MEMS); 7) Research Directions for Photonics; and 8) Research Directions for Materials. This paper is presented in viewgraph form.

Investigation of Structures of Microwave Microelectromechanical-System Switches by Taguchi Method

NASA Astrophysics Data System (ADS)

Lai, Yeong-Lin; Lin, Chien-Hung

2007-10-01

The optimal design of microwave microelectromechanical-system (MEMS) switches by the Taguchi method is presented. The structures of the switches are analyzed and optimized in terms of the effective stiffness constant, the maximum von Mises stress, and the natural frequency in order to improve the reliability and the performance of the MEMS switches. There are four factors, each of which has three levels in the Taguchi method for the MEMS switches. An L9(34) orthogonal array is used for the matrix experiments. The characteristics of the experiments are studied by the finite-element method and the analytical method. The responses of the signal-to-noise (S/N) ratios of the characteristics of the switches are investigated. The statistical analysis of variance (ANOVA) is used to interpret the experimental results and decide the significant factors. The final optimum setting, A1B3C1D2, predicts that the effective stiffness constant is 1.06 N/m, the maximum von Mises stress is 76.9 MPa, and the natural frequency is 29.331 kHz. The corresponding switching time is 34 μs, and the pull-down voltage is 9.8 V.

Development of an alternating magnetic-field-assisted finishing process for microelectromechanical systems micropore x-ray optics.

PubMed

Riveros, Raul E; Yamaguchi, Hitomi; Mitsuishi, Ikuyuki; Takagi, Utako; Ezoe, Yuichiro; Kato, Fumiki; Sugiyama, Susumu; Yamasaki, Noriko; Mitsuda, Kazuhisa

2010-06-20

X-ray astronomy research is often limited by the size, weight, complexity, and cost of functioning x-ray optics. Micropore optics promises an economical alternative to traditional (e.g., glass or foil) x-ray optics; however, many manufacturing difficulties prevent micropore optics from being a viable solution. Ezoe et al. introduced microelectromechanical systems (MEMS) micropore optics having curvilinear micropores in 2008. Made by either deep reactive ion etching or x-ray lithography, electroforming, and molding (LIGA), MEMS micropore optics suffer from high micropore sidewall roughness (10-30nmrms) which, by current standards, cannot be improved. In this research, a new alternating magnetic-field-assisted finishing process was developed using a mixture of ferrofluid and microscale abrasive slurry. A machine was built, and a set of working process parameters including alternating frequency, abrasive size, and polishing time was selected. A polishing experiment on a LIGA-fabricated MEMS micropore optic was performed, and a change in micropore sidewall roughness of 9.3+/-2.5nmrms to 5.7+/-0.7nmrms was measured. An improvement in x-ray reflectance was also seen. This research shows the feasibility and confirms the effects of this new polishing process on MEMS micropore optics.

Application of Au-Sn eutectic bonding in hermetic radio-frequency microelectromechanical system wafer level packaging

NASA Astrophysics Data System (ADS)

Wang, Qian; Choa, Sung-Hoon; Kim, Woonbae; Hwang, Junsik; Ham, Sukjin; Moon, Changyoul

2006-03-01

Development of packaging is one of the critical issues toward realizing commercialization of radio-frequency-microelectromechanical system (RF-MEMS) devices. The RF-MEMS package should be designed to have small size, hermetic protection, good RF performance, and high reliability. In addition, packaging should be conducted at sufficiently low temperature. In this paper, a low-temperature hermetic wafer level packaging scheme for the RF-MEMS devices is presented. For hermetic sealing, Au-Sn eutectic bonding technology at temperatures below 300°C is used. Au-Sn multilayer metallization with a square loop of 70 µm in width is performed. The electrical feed-through is achieved by the vertical through-hole via filling with electroplated Cu. The size of the MEMS package is 1 mm × 1 mm × 700 µm. The shear strength and hermeticity of the package satisfies the requirements of MIL-STD-883F. Any organic gases or contamination are not observed inside the package. The total insertion loss for the packaging is 0.075 dB at 2 GHz. Furthermore, the robustness of the package is demonstrated by observing no performance degradation and physical damage of the package after several reliability tests.

A new linear structured light module based on the MEMS micromirror

NASA Astrophysics Data System (ADS)

Zhou, Peng; Shen, Wenjiang; Yu, Huijun

2017-10-01

A new linear structured light module based on the Micro-Electro-Mechanical System (MEMS) two-dimensional scanning micromirror was designed and created. This module consists of a laser diode, a convex lens, and the MEMS micromirror. The laser diode generates the light and the convex lens control the laser beam to converge on a single point with large depth of focus. The fast scan in horizontal direction of the micromirror will turn the laser spot into a homogenous laser line. Meanwhile, the slow scan in vertical direction of the micromirror will move the laser line in the vertical direction. The width of the line generated by this module is 300μm and the length is 120mm and the moving distance is 100mm at 30cm away from the module. It will promote the development of industrial detection.

LTCC interconnects in microsystems

NASA Astrophysics Data System (ADS)

Rusu, Cristina; Persson, Katrin; Ottosson, Britta; Billger, Dag

2006-06-01

Different microelectromechanical system (MEMS) packaging strategies towards high packaging density of MEMS devices and lower expenditure exist both in the market and in research. For example, electrical interconnections and low stress wafer level packaging are essential for improving device performance. Hybrid integration of low temperature co-fired ceramics (LTCC) with Si can be a way for an easier packaging system with integrated electrical interconnection, and as well towards lower costs. Our research on LTCC-Si integration is reported in this paper.

Ultra-Low-Power MEMS Selective Gas Sensors

NASA Technical Reports Server (NTRS)

Stetter, Joseph

2012-01-01

This innovation is a system for gas sensing that includes an ultra-low-power MEMS (microelectromechanical system) gas sensor, combined with unique electronic circuitry and a proprietary algorithm for operating the sensor. The electronics were created from scratch, and represent a novel design capable of low-power operation of the proprietary MEMS gas sensor platform. The algorithm is used to identify a specific target gas in a gas mixture, making the sensor selective to that target gas.

Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting

NASA Astrophysics Data System (ADS)

Shi, Qiongfeng; Wang, Tao; Kobayashi, Takeshi; Lee, Chengkuo

2016-05-01

Acoustic energy transfer (AET) has been widely used for contactless energy delivery to implantable devices. However, most of the energy harvesters (ultrasonic receivers) for AET are macro-scale transducers with large volume and limited operation bandwidth. Here, we propose and investigate two microelectromechanical systems diaphragm based piezoelectric ultrasonic energy harvesters (PUEHs) as an alternative for AET. The proposed PUEHs consist of micro-scale diaphragm array with different geometric parameter design. Diaphragms in PUEH-1 have large length to width ratio to achieve broadband property, while its energy harvesting performance is compromised. Diaphragms in PUEH-2 have smaller length to width ratio and thinner thickness to achieve both broadband property and good energy harvesting performance. Both PUEHs have miniaturized size and wide operation bandwidth that are ideally suitable to be integrated as power source for implantable biomedical devices. PUEH-1 has a merged -6 dB bandwidth of 74.5% with a central frequency of 350 kHz. PUEH-2 has two separate -6 dB bandwidth of 73.7%/30.8% with central frequencies of 285 kHz/650 kHz. They can adapt to various ultrasonic sources with different working frequency spectrum. Maximum output power is 34.3 nW and 84.3 nW for PUEH-1 and PUEH-2 at 1 mW/cm2 ultrasound intensity input, respectively. The associated power density is 0.734 μW/cm2 and 4.1 μW/cm2, respectively. Better energy harvesting performance is achieved for PUEH-2 because of the optimized length to width ratio and thickness design. Both PUEHs offer more alignment flexibility with more than 40% power when they are in the range of the ultrasound transmitter.

Microelectromechanical systems for experimental physics and optical telecommunications

NASA Astrophysics Data System (ADS)

Aksyuk, Vladimir Anatolyevich

1999-12-01

Micro-Electro-Mechanical Systems (MEMS) are an emerging technology, which, when applied to the field of physical sensors, offers not only an obvious advantage of being small and cheap, but more importantly, provides some unique experimental opportunities. These are based on the way physical properties scale with decreasing size. This thesis discusses these basic principles and corresponding advantages and limitations of MEMS technology and presents several experiments in which micromachines are used to do physical measurements that could not be done before. Three types of micromechanical magnetometers are demonstrated. When compared to the state of the art traditional techniques they show greater sensitivity, faster response and can be applied over a wider range of experimental conditions. The high-Q micromechanical torsional oscillator magnetometer is used to observe mesoscopic vortex physics, including single flux lines penetrating into a type-II superconductor just above the first critical field. The Faraday balance ``Trampoline'' magnetometer combines high sensitivity, high bandwidth and can be operated in a wide temperature range. It is used in both high pulsed magnetic fields to record deHaas-vanAlphen oscillations and in DC magnetic fields for magnetization measurements at temperatures down to 100mK. The high sensitivity DC torque magnetometer offers yet higher sensitivity and can be used for a variety of magnetization measurements. Several other MEMS devices for physics and telecommunications applications are presented, including a micromachined near field scanning optical microscope, MEMS fiberoptic switches and large-area large-angle scanners. They provide examples of complex functionality that can be achieved with micromechanics by combining sensors with inherently low-power electrostatic actuators. The optically powered optical power limiter demonstrates the possibility of operating MEMS with optical rather than electrical power.

Far-field emission characteristics and linewidth measurements of surface micro-machined MEMS tunable VCSELs

NASA Astrophysics Data System (ADS)

Paul, Sujoy; Gierl, Christian; Gründl, Tobias; Zogal, Karolina; Meissner, Peter; Amann, Markus-Christian; Küppers, Franko

2013-03-01

In this paper, we demonstrate for the first time the far-field experimental results and the linewidth characteris- tics for widely tunable surface-micromachined micro-electro-mechanical system (MEMS) vertical-cavity surface- emitting lasers (VCSELs) operating at 1550 nm. The fundamental Gaussian mode emission is confirmed by optimizing the radius of curvature of top distributed Bragg reflector (DBR) membrane and by choosing an ap- propriate diameter of circular buried tunnel junctions (BTJs) so that only the fundamental Gaussian mode can sustain. For these VCSELs, a mode-hop free continuous tuning over 100 nm has already been demonstrated, which is achieved by electro-thermal tuning of the MEMS mirror. The fiber-coupled optical power of 2mW over the entire tuning range has been reported. The singlemode laser emission has more than 40 dB of side-mode suppression ratio (SMSR). The smallest linewidth achieved with these of MEMS tunable VCSELs is 98MHz which is one order of magnitude higher than that of fixed-wavelength VCSELs.

A Power-Efficient Bio-Potential Acquisition Device with DS-MDE Sensors for Long-Term Healthcare Monitoring Applications

PubMed Central

Chang, Chia-Lin; Chang, Chih-Wei; Huang, Hong-Yi; Hsu, Chen-Ming; Huang, Chia-Hsuan; Chiou, Jin-Chern; Luo, Ching-Hsing

2010-01-01

This work describes a power-efficient bio-potential acquisition device for long-term healthcare applications that is implemented using novel microelectromechanical dry electrodes (MDE) and a low power bio-potential processing chip. Using micromachining technology, an attempt is also made to enhance the sensing reliability and stability by fabricating a diamond-shaped MDE (DS-MDE) that has a satisfactory self-stability capability and superior electric conductivity when attached onto skin without any extra skin tissue injury technology. To acquire differential bio-potentials such as ECG signals, the proposed processing chip fabricated in a standard CMOS process has a high common mode rejection ratio (C.M.R.R.) differential amplifier and a 12-bit analog-to-digital converter (ADC). Use of the proposed system and integrate simple peripheral commercial devices can obtain the ECG signal efficiently without additional skin tissue injury and ensure continuous monitoring more than 70 hours with a 400 mAh battery. PMID:22399907

A power-efficient bio-potential acquisition device with DS-MDE sensors for long-term healthcare monitoring applications.

PubMed

Chang, Chia-Lin; Chang, Chih-Wei; Huang, Hong-Yi; Hsu, Chen-Ming; Huang, Chia-Hsuan; Chiou, Jin-Chern; Luo, Ching-Hsing

2010-01-01

This work describes a power-efficient bio-potential acquisition device for long-term healthcare applications that is implemented using novel microelectromechanical dry electrodes (MDE) and a low power bio-potential processing chip. Using micromachining technology, an attempt is also made to enhance the sensing reliability and stability by fabricating a diamond-shaped MDE (DS-MDE) that has a satisfactory self-stability capability and superior electric conductivity when attached onto skin without any extra skin tissue injury technology. To acquire differential bio-potentials such as ECG signals, the proposed processing chip fabricated in a standard CMOS process has a high common mode rejection ratio (C.M.R.R.) differential amplifier and a 12-bit analog-to-digital converter (ADC). Use of the proposed system and integrate simple peripheral commercial devices can obtain the ECG signal efficiently without additional skin tissue injury and ensure continuous monitoring more than 70 hours with a 400 mAh battery.

An extended harmonic balance method based on incremental nonlinear control parameters

NASA Astrophysics Data System (ADS)

Khodaparast, Hamed Haddad; Madinei, Hadi; Friswell, Michael I.; Adhikari, Sondipon; Coggon, Simon; Cooper, Jonathan E.

2017-02-01

A new formulation for calculating the steady-state responses of multiple-degree-of-freedom (MDOF) non-linear dynamic systems due to harmonic excitation is developed. This is aimed at solving multi-dimensional nonlinear systems using linear equations. Nonlinearity is parameterised by a set of 'non-linear control parameters' such that the dynamic system is effectively linear for zero values of these parameters and nonlinearity increases with increasing values of these parameters. Two sets of linear equations which are formed from a first-order truncated Taylor series expansion are developed. The first set of linear equations provides the summation of sensitivities of linear system responses with respect to non-linear control parameters and the second set are recursive equations that use the previous responses to update the sensitivities. The obtained sensitivities of steady-state responses are then used to calculate the steady state responses of non-linear dynamic systems in an iterative process. The application and verification of the method are illustrated using a non-linear Micro-Electro-Mechanical System (MEMS) subject to a base harmonic excitation. The non-linear control parameters in these examples are the DC voltages that are applied to the electrodes of the MEMS devices.

Paper-based membraneless hydrogen peroxide fuel cell prepared by micro-fabrication

NASA Astrophysics Data System (ADS)

Mousavi Ehteshami, Seyyed Mohsen; Asadnia, Mohsen; Tan, Swee Ngin; Chan, Siew Hwa

2016-01-01

A paper-based membraneless single-compartment hydrogen peroxide power source prepared by micro-electromechanical systems (MEMS) technology is reported. The cell utilizes hydrogen peroxide as both fuel and oxidant in a low volume cell fabricated on paper. The fabrication method used is a simple method where precise, small-sized patterns are produced which include the hydrophilic paper bounded by hydrophobic resin. Open circuit potentials of 0.61 V and 0.32 V are achieved for the cells fabricated with Prussian Blue as the cathode and aluminium/nickel as the anode materials, respectively. The power produced by the cells is 0.81 mW cm-2 at 0.26 V and 0.38 mW cm-2 at 0.14 V, respectively, even after the cell is bent or distorted. Such a fuel cell provides an easily fabricated, environmentally friendly, flexible and cost saving power source. The cell may be integrated within a self-sustained diagnostic system to provide the on-demand power for future bio-sensing applications.

Spatially distributed modal signals of free shallow membrane shell structronic system

NASA Astrophysics Data System (ADS)

Yue, H. H.; Deng, Z. Q.; Tzou, H. S.

2008-11-01

Based on the smart material and structronics technology, distributed sensor and control of shell structures have been rapidly developed for the last 20 years. This emerging technology has been utilized in aerospace, telecommunication, micro-electromechanical systems and other engineering applications. However, distributed monitoring technique and its resulting global spatially distributed sensing signals of shallow paraboloidal membrane shells are not clearly understood. In this paper, modeling of free flexible paraboloidal shell with spatially distributed sensor, micro-sensing signal characteristics, and location of distributed piezoelectric sensor patches are investigated based on a new set of assumed mode shape functions. Parametric analysis indicates that the signal generation depends on modal membrane strains in the meridional and circumferential directions in which the latter is more significant than the former, when all bending strains vanish in membrane shells. This study provides a modeling and analysis technique for distributed sensors laminated on lightweight paraboloidal flexible structures and identifies critical components and regions that generate significant signals.

Spatial Signal Characteristics of Shallow Paraboloidal Shell Structronic Systems

NASA Astrophysics Data System (ADS)

Yue, H. H.; Deng, Z. Q.; Tzou, H. S.

Based on the smart material and structronics technology, distributed sensor and control of shell structures have been rapidly developed for the last twenty years. This emerging technology has been utilized in aerospace, telecommunication, micro-electromechanical systems and other engineering applications. However, distributed monitoring technique and its resulting global spatially distributed sensing signals of thin flexible membrane shells are not clearly understood. In this paper, modeling of free thin paraboloidal shell with spatially distributed sensor, micro-sensing signal characteristics, and location of distributed piezoelectric sensor patches are investigated based on a new set of assumed mode shape functions. Parametric analysis indicates that the signal generation depends on modal membrane strains in the meridional and circumferential directions in which the latter is more significant than the former, when all bending strains vanish in membrane shells. This study provides a modeling and analysis technique for distributed sensors laminated on lightweight paraboloidal flexible structures and identifies critical components and regions that generate significant signals.

A Noise Reduction Method for Dual-Mass Micro-Electromechanical Gyroscopes Based on Sample Entropy Empirical Mode Decomposition and Time-Frequency Peak Filtering

PubMed Central

Shen, Chong; Li, Jie; Zhang, Xiaoming; Shi, Yunbo; Tang, Jun; Cao, Huiliang; Liu, Jun

2016-01-01

The different noise components in a dual-mass micro-electromechanical system (MEMS) gyroscope structure is analyzed in this paper, including mechanical-thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN) and Coriolis signal in-phase noise (IPN). The structure equivalent electronic model is established, and an improved white Gaussian noise reduction method for dual-mass MEMS gyroscopes is proposed which is based on sample entropy empirical mode decomposition (SEEMD) and time-frequency peak filtering (TFPF). There is a contradiction in TFPS, i.e., selecting a short window length may lead to good preservation of signal amplitude but bad random noise reduction, whereas selecting a long window length may lead to serious attenuation of the signal amplitude but effective random noise reduction. In order to achieve a good tradeoff between valid signal amplitude preservation and random noise reduction, SEEMD is adopted to improve TFPF. Firstly, the original signal is decomposed into intrinsic mode functions (IMFs) by EMD, and the SE of each IMF is calculated in order to classify the numerous IMFs into three different components; then short window TFPF is employed for low frequency component of IMFs, and long window TFPF is employed for high frequency component of IMFs, and the noise component of IMFs is wiped off directly; at last the final signal is obtained after reconstruction. Rotation experimental and temperature experimental are carried out to verify the proposed SEEMD-TFPF algorithm, the verification and comparison results show that the de-noising performance of SEEMD-TFPF is better than that achievable with the traditional wavelet, Kalman filter and fixed window length TFPF methods. PMID:27258276

A Noise Reduction Method for Dual-Mass Micro-Electromechanical Gyroscopes Based on Sample Entropy Empirical Mode Decomposition and Time-Frequency Peak Filtering.

PubMed

Shen, Chong; Li, Jie; Zhang, Xiaoming; Shi, Yunbo; Tang, Jun; Cao, Huiliang; Liu, Jun

2016-05-31

The different noise components in a dual-mass micro-electromechanical system (MEMS) gyroscope structure is analyzed in this paper, including mechanical-thermal noise (MTN), electronic-thermal noise (ETN), flicker noise (FN) and Coriolis signal in-phase noise (IPN). The structure equivalent electronic model is established, and an improved white Gaussian noise reduction method for dual-mass MEMS gyroscopes is proposed which is based on sample entropy empirical mode decomposition (SEEMD) and time-frequency peak filtering (TFPF). There is a contradiction in TFPS, i.e., selecting a short window length may lead to good preservation of signal amplitude but bad random noise reduction, whereas selecting a long window length may lead to serious attenuation of the signal amplitude but effective random noise reduction. In order to achieve a good tradeoff between valid signal amplitude preservation and random noise reduction, SEEMD is adopted to improve TFPF. Firstly, the original signal is decomposed into intrinsic mode functions (IMFs) by EMD, and the SE of each IMF is calculated in order to classify the numerous IMFs into three different components; then short window TFPF is employed for low frequency component of IMFs, and long window TFPF is employed for high frequency component of IMFs, and the noise component of IMFs is wiped off directly; at last the final signal is obtained after reconstruction. Rotation experimental and temperature experimental are carried out to verify the proposed SEEMD-TFPF algorithm, the verification and comparison results show that the de-noising performance of SEEMD-TFPF is better than that achievable with the traditional wavelet, Kalman filter and fixed window length TFPF methods.

PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes

PubMed Central

Su, Yan; Tong, Xin; Liu, Nan; Han, Guowei; Si, Chaowei; Ning, Jin; Li, Zhaofeng; Yang, Fuhua

2018-01-01

With an aim to reduce the cost of prototype development, this paper establishes a PSPICE hybrid model for the simulation of capacitive microelectromechanical systems (MEMS) gyroscopes. This is achieved by modeling gyroscopes in different modules, then connecting them in accordance with the corresponding principle diagram. Systematic simulations of this model are implemented along with a consideration of details of MEMS gyroscopes, including a capacitance model without approximation, mechanical thermal noise, and the effect of ambient temperature. The temperature compensation scheme and optimization of interface circuits are achieved based on the hybrid closed-loop simulation of MEMS gyroscopes. The simulation results show that the final output voltage is proportional to the angular rate input, which verifies the validity of this model. PMID:29597284

Demonstration of a High Open-Circuit Voltage GaN Betavoltaic Microbattery

NASA Astrophysics Data System (ADS)

Cheng, Zai-Jun; San, Hai-Sheng; Chen, Xu-Yuan; Liu, Bo; Feng, Zhi-Hong

2011-07-01

A high open-circuit voltage betavoltaic microbattery based on a GaN p-i-n diode is demonstrated. Under the irradiation of a 4×4 mm2 planar solid 63Ni source with an activity of 2 mCi, the open-circuit voltage Voc of the fabricated single 2×2mm2 cell reaches as high as 1.62 V, the short-circuit current density Jsc is measured to be 16nA/cm2. The microbattery has a fill factor of 55%, and the energy conversion efficiency of beta radiation into electricity reaches to 1.13%. The results suggest that GaN is a highly promising potential candidate for long-life betavoltaic microbatteries used as power supplies for microelectromechanical system devices.

Image Registration for Stability Testing of MEMS

NASA Technical Reports Server (NTRS)

Memarsadeghi, Nargess; LeMoigne, Jacqueline; Blake, Peter N.; Morey, Peter A.; Landsman, Wayne B.; Chambers, Victor J.; Moseley, Samuel H.

2011-01-01

Image registration, or alignment of two or more images covering the same scenes or objects, is of great interest in many disciplines such as remote sensing, medical imaging. astronomy, and computer vision. In this paper, we introduce a new application of image registration algorithms. We demonstrate how through a wavelet based image registration algorithm, engineers can evaluate stability of Micro-Electro-Mechanical Systems (MEMS). In particular, we applied image registration algorithms to assess alignment stability of the MicroShutters Subsystem (MSS) of the Near Infrared Spectrograph (NIRSpec) instrument of the James Webb Space Telescope (JWST). This work introduces a new methodology for evaluating stability of MEMS devices to engineers as well as a new application of image registration algorithms to computer scientists.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lyu, Sungnam, E-mail: blueden@postech.ac.kr; Hwang, Woonbong, E-mail: whwang@postech.ac.kr

Patterning techniques are essential to many research fields such as chemistry, biology, medicine, and micro-electromechanical systems. In this letter, we report a simple, fast, and low-cost superhydrophobic patterning method using a superhydrophilic template. The technique is based on the contact stamping of the surface during hydrophobic dip coating. Surface characteristics were measured using scanning electron microscopy and energy-dispersive X-ray spectroscopic analysis. The results showed that the hydrophilic template, which was contacted with the stamp, was not affected by the hydrophobic solution. The resolution study was conducted using a stripe shaped stamp. The patterned line was linearly proportional to the widthmore » of the stamp line with a constant narrowing effect. A surface with regions of four different types of wetting was fabricated to demonstrate the patterning performance.« less

Tightly-Coupled Integration of Multi-GNSS Single-Frequency RTK and MEMS-IMU for Enhanced Positioning Performance

PubMed Central

Li, Tuan; Zhang, Hongping; Niu, Xiaoji; Gao, Zhouzheng

2017-01-01

Dual-frequency Global Positioning System (GPS) Real-time Kinematics (RTK) has been proven in the past few years to be a reliable and efficient technique to obtain high accuracy positioning. However, there are still challenges for GPS single-frequency RTK, such as low reliability and ambiguity resolution (AR) success rate, especially in kinematic environments. Recently, multi-Global Navigation Satellite System (multi-GNSS) has been applied to enhance the RTK performance in terms of availability and reliability of AR. In order to further enhance the multi-GNSS single-frequency RTK performance in terms of reliability, continuity and accuracy, a low-cost micro-electro-mechanical system (MEMS) inertial measurement unit (IMU) is adopted in this contribution. We tightly integrate the single-frequency GPS/BeiDou/GLONASS and MEMS-IMU through the extended Kalman filter (EKF), which directly fuses the ambiguity-fixed double-differenced (DD) carrier phase observables and IMU data. A field vehicular test was carried out to evaluate the impacts of the multi-GNSS and IMU on the AR and positioning performance in different system configurations. Test results indicate that the empirical success rate of single-epoch AR for the tightly-coupled single-frequency multi-GNSS RTK/INS integration is over 99% even at an elevation cut-off angle of 40°, and the corresponding position time series is much more stable in comparison with the GPS solution. Besides, GNSS outage simulations show that continuous positioning with certain accuracy is possible due to the INS bridging capability when GNSS positioning is not available. PMID:29077070

Tightly-Coupled Integration of Multi-GNSS Single-Frequency RTK and MEMS-IMU for Enhanced Positioning Performance.

PubMed

Li, Tuan; Zhang, Hongping; Niu, Xiaoji; Gao, Zhouzheng

2017-10-27

Dual-frequency Global Positioning System (GPS) Real-time Kinematics (RTK) has been proven in the past few years to be a reliable and efficient technique to obtain high accuracy positioning. However, there are still challenges for GPS single-frequency RTK, such as low reliability and ambiguity resolution (AR) success rate, especially in kinematic environments. Recently, multi-Global Navigation Satellite System (multi-GNSS) has been applied to enhance the RTK performance in terms of availability and reliability of AR. In order to further enhance the multi-GNSS single-frequency RTK performance in terms of reliability, continuity and accuracy, a low-cost micro-electro-mechanical system (MEMS) inertial measurement unit (IMU) is adopted in this contribution. We tightly integrate the single-frequency GPS/BeiDou/GLONASS and MEMS-IMU through the extended Kalman filter (EKF), which directly fuses the ambiguity-fixed double-differenced (DD) carrier phase observables and IMU data. A field vehicular test was carried out to evaluate the impacts of the multi-GNSS and IMU on the AR and positioning performance in different system configurations. Test results indicate that the empirical success rate of single-epoch AR for the tightly-coupled single-frequency multi-GNSS RTK/INS integration is over 99% even at an elevation cut-off angle of 40°, and the corresponding position time series is much more stable in comparison with the GPS solution. Besides, GNSS outage simulations show that continuous positioning with certain accuracy is possible due to the INS bridging capability when GNSS positioning is not available.

Design and Evaluation of a Scalable and Reconfigurable Multi-Platform System for Acoustic Imaging

PubMed Central

Izquierdo, Alberto; Villacorta, Juan José; del Val Puente, Lara; Suárez, Luis

2016-01-01

This paper proposes a scalable and multi-platform framework for signal acquisition and processing, which allows for the generation of acoustic images using planar arrays of MEMS (Micro-Electro-Mechanical Systems) microphones with low development and deployment costs. Acoustic characterization of MEMS sensors was performed, and the beam pattern of a module, based on an 8 × 8 planar array and of several clusters of modules, was obtained. A flexible framework, formed by an FPGA, an embedded processor, a computer desktop, and a graphic processing unit, was defined. The processing times of the algorithms used to obtain the acoustic images, including signal processing and wideband beamforming via FFT, were evaluated in each subsystem of the framework. Based on this analysis, three frameworks are proposed, defined by the specific subsystems used and the algorithms shared. Finally, a set of acoustic images obtained from sound reflected from a person are presented as a case study in the field of biometric identification. These results reveal the feasibility of the proposed system. PMID:27727174

Flight Hydrogen Sensor for use in the ISS Oxygen Generation Assembly

NASA Technical Reports Server (NTRS)

MSadoques, George, Jr.; Makel, Darby B.

2005-01-01

This paper provides a description of the hydrogen sensor Orbital Replacement Unit (ORU) used on the Oxygen Generation Assembly (OGA), to be operated on the International Space Station (ISS). The hydrogen sensor ORU is being provided by Makel Engineering, Inc. (MEI) to monitor the oxygen outlet for the presence of hydrogen. The hydrogen sensor ORU is a triple redundant design where each sensor converts raw measurements to actual hydrogen partial pressure that is reported to the OGA system controller. The signal outputs are utilized for system shutdown in the event that the hydrogen concentration in the oxygen outlet line exceeds the specified shutdown limit. Improvements have been made to the Micro-Electro-Mechanical Systems (MEMS) based sensing element, screening, and calibration process to meet OGA operating requirements. Two flight hydrogen sensor ORUs have successfully completed the acceptance test phase. This paper also describes the sensor s performance during acceptance testing, additional tests planned to extend the operational performance calibration cycle, and integration with the OGA system.

A minimally invasive blood-extraction system: elastic self-recovery actuator integrated with an ultrahigh- aspect-ratio microneedle.

PubMed

Li, Cheng Guo; Lee, Kwang; Lee, Chang Yeol; Dangol, Manita; Jung, Hyungil

2012-08-28

A minimally invasive blood-extraction system is fabricated by the integration of an elastic self-recovery actuator and an ultrahigh-aspect-ratio microneedle. The simple elastic self-recovery actuator converts finger force to elastic energy to provide power for blood extraction and transport without requiring an external source of power. This device has potential utility in the biomedical field within the framework of complete micro-electromechanical systems. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Integration of functional myotubes with a Bio-MEMS device for non-invasive interrogation.

PubMed

Wilson, Kerry; Molnar, Peter; Hickman, James

2007-07-01

We have developed a biological micro-electromechanical system (Bio-MEMS) device consisting of surface-modified microfabricated silicon cantilevers and an AFM detection apparatus for the study of cultured myotubes. With this system we are able to selectively stimulate the myotubes as well as report on a variety of physiological properties of the myotubes in real time and in a high-throughput manner. This system will serve as the foundation for future work integrating multiple tissue types for the creation of Bio-MEMS analogues of complex tissues and biological circuits.

Implementation of a Virtual Microphone Array to Obtain High Resolution Acoustic Images

PubMed Central

Izquierdo, Alberto; Suárez, Luis; Suárez, David

2017-01-01

Using arrays with digital MEMS (Micro-Electro-Mechanical System) microphones and FPGA-based (Field Programmable Gate Array) acquisition/processing systems allows building systems with hundreds of sensors at a reduced cost. The problem arises when systems with thousands of sensors are needed. This work analyzes the implementation and performance of a virtual array with 6400 (80 × 80) MEMS microphones. This virtual array is implemented by changing the position of a physical array of 64 (8 × 8) microphones in a grid with 10 × 10 positions, using a 2D positioning system. This virtual array obtains an array spatial aperture of 1 × 1 m2. Based on the SODAR (SOund Detection And Ranging) principle, the measured beampattern and the focusing capacity of the virtual array have been analyzed, since beamforming algorithms assume to be working with spherical waves, due to the large dimensions of the array in comparison with the distance between the target (a mannequin) and the array. Finally, the acoustic images of the mannequin, obtained for different frequency and range values, have been obtained, showing high angular resolutions and the possibility to identify different parts of the body of the mannequin. PMID:29295485

A Method for Testing the Dynamic Accuracy of Micro-Electro-Mechanical Systems (MEMS) Magnetic, Angular Rate, and Gravity (MARG) Sensors for Inertial Navigation Systems (INS) and Human Motion Tracking Applications

DTIC Science & Technology

2010-06-01

32 2. Low-Cost Framework........................................................................33 3. Low Magnetic Field ...that have a significant impact on the magnetic field measured by a MARG, which could potentially add errors that are due entirely to the test...minimize the impact on the local magnetic field , and the apparatus was made as rigidly as possible using 2 x 4s to minimize any out of plane motions that

Greyscale Photolithography for Multilayer PZT Microelectromechanical Systems (MEMS) Device Applications

DTIC Science & Technology

We present development of a process to perform greyscale photolithography on a 2.55-m thick photoresist in order to transfer tiered and sloped...platinum or iridium oxide (IrO2) electrodes above and below each layer. Process variables including resist rehydration , focus of the exposure, and UV cure...bake temperature were optimized to produce the best greyscale profile through the thickness of the resist.

Microscale Thermal-Transpiration Gas Pump

NASA Technical Reports Server (NTRS)

Vargo, Stephen; Muntz, Phillip; Shiflett, Geoff

2003-01-01

A recent addition to the growing class of microelectromechanical systems (MEMS) is a single stage of a Knudsen compressor. This device was fabricated and tested to demonstrate the feasibility of Knudsen compressors as miniature vacuum pumps for future portable scientific instruments. The attributes of Knudsen compressors that make them attractive as miniature vacuum pumps are that they contain no moving parts and operate without need for lubricants or working fluids.

Electrostatic apparatus for measurement of microfracture strength

DOEpatents

de Boer, Maarten; Bitsie, Fernando; Jensen, Brian D.

2002-01-01

A new class of materials testing apparatus has been invented. Particularly suited to the measurement of fracture and fatigue properties in the extremely strong materials encountered in microelectromechanical systems, material strains well in excess of 1% can be applied pseudostatically, dynamically, or repetitively by these testers. There are no other practical methods to determine these material properties routinely in a process environment, and few alternatives in any circumstances.

Improved analysis and visualization of friction loop data: unraveling the energy dissipation of meso-scale stick-slip motion

NASA Astrophysics Data System (ADS)

Kokorian, Jaap; Merlijn van Spengen, W.

2017-11-01

In this paper we demonstrate a new method for analyzing and visualizing friction force measurements of meso-scale stick-slip motion, and introduce a method for extracting two separate dissipative energy components. Using a microelectromechanical system tribometer, we execute 2 million reciprocating sliding cycles, during which we measure the static friction force with a resolution of \

FPGA platform for MEMS Disc Resonance Gyroscope (DRG) control

NASA Astrophysics Data System (ADS)

Keymeulen, Didier; Peay, Chris; Foor, David; Trung, Tran; Bakhshi, Alireza; Withington, Phil; Yee, Karl; Terrile, Rich

2008-04-01

Inertial navigation systems based upon optical gyroscopes tend to be expensive, large, power consumptive, and are not long lived. Micro-Electromechanical Systems (MEMS) based gyros do not have these shortcomings; however, until recently, the performance of MEMS based gyros had been below navigation grade. Boeing and JPL have been cooperating since 1997 to develop high performance MEMS gyroscopes for miniature, low power space Inertial Reference Unit applications. The efforts resulted in demonstration of a Post Resonator Gyroscope (PRG). This experience led to the more compact Disc Resonator Gyroscope (DRG) for further reduced size and power with potentially increased performance. Currently, the mass, volume and power of the DRG are dominated by the size of the electronics. This paper will detail the FPGA based digital electronics architecture and its implementation for the DRG which will allow reduction of size and power and will increase performance through a reduction in electronics noise. Using the digital control based on FPGA, we can program and modify in real-time the control loop to adapt to the specificity of each particular gyro and the change of the mechanical characteristic of the gyro during its life time.

Intelligent Chemical Sensor Systems for In-space Safety Applications

NASA Technical Reports Server (NTRS)

Hunter, G. W.; Xu, J. C.; Neudeck, P. G.; Makel, D. B.; Ward, B.; Liu, C. C.

2006-01-01

Future in-space and lunar operations will require significantly improved monitoring and Integrated System Health Management (ISHM) throughout the mission. In particular, the monitoring of chemical species is an important component of an overall monitoring system for space vehicles and operations. For example, in leak monitoring of propulsion systems during launch, inspace, and on lunar surfaces, detection of low concentrations of hydrogen and other fuels is important to avoid explosive conditions that could harm personnel and damage the vehicle. Dependable vehicle operation also depends on the timely and accurate measurement of these leaks. Thus, the development of a sensor array to determine the concentration of fuels such as hydrogen, hydrocarbons, or hydrazine as well as oxygen is necessary. Work has been on-going to develop an integrated smart leak detection system based on miniaturized sensors to detect hydrogen, hydrocarbons, or hydrazine, and oxygen. The approach is to implement Microelectromechanical Systems (MEMS) based sensors incorporated with signal conditioning electronics, power, data storage, and telemetry enabling intelligent systems. The final sensor system will be self-contained with a surface area comparable to a postage stamp. This paper discusses the development of this "Lick and Stick" leak detection system and it s application to In-Space Transportation and other Exploration applications.

Method for integrating microelectromechanical devices with electronic circuitry

DOEpatents

Montague, Stephen; Smith, James H.; Sniegowski, Jeffry J.; McWhorter, Paul J.

1998-01-01

A method for integrating one or more microelectromechanical (MEM) devices with electronic circuitry. The method comprises the steps of forming each MEM device within a cavity below a device surface of the substrate; encapsulating the MEM device prior to forming electronic circuitry on the substrate; and releasing the MEM device for operation after fabrication of the electronic circuitry. Planarization of the encapsulated MEM device prior to formation of the electronic circuitry allows the use of standard processing steps for fabrication of the electronic circuitry.

A Robust Real Time Direction-of-Arrival Estimation Method for Sequential Movement Events of Vehicles.

PubMed

Liu, Huawei; Li, Baoqing; Yuan, Xiaobing; Zhou, Qianwei; Huang, Jingchang

2018-03-27

Parameters estimation of sequential movement events of vehicles is facing the challenges of noise interferences and the demands of portable implementation. In this paper, we propose a robust direction-of-arrival (DOA) estimation method for the sequential movement events of vehicles based on a small Micro-Electro-Mechanical System (MEMS) microphone array system. Inspired by the incoherent signal-subspace method (ISM), the method that is proposed in this work employs multiple sub-bands, which are selected from the wideband signals with high magnitude-squared coherence to track moving vehicles in the presence of wind noise. The field test results demonstrate that the proposed method has a better performance in emulating the DOA of a moving vehicle even in the case of severe wind interference than the narrowband multiple signal classification (MUSIC) method, the sub-band DOA estimation method, and the classical two-sided correlation transformation (TCT) method.

Deformation analysis of MEMS structures by modified digital moiré methods

NASA Astrophysics Data System (ADS)

Liu, Zhanwei; Lou, Xinhao; Gao, Jianxin

2010-11-01

Quantitative deformation analysis of micro-fabricated electromechanical systems is of importance for the design and functional control of microsystems. In this paper, two modified digital moiré processing methods, Gaussian blurring algorithm combined with digital phase shifting and geometrical phase analysis (GPA) technique based on digital moiré method, are developed to quantitatively analyse the deformation behaviour of micro-electro-mechanical system (MEMS) structures. Measuring principles and experimental procedures of the two methods are described in detail. A digital moiré fringe pattern is generated by superimposing a specimen grating etched directly on a microstructure surface with a digital reference grating (DRG). Most of the grating noise is removed from the digital moiré fringes, which enables the phase distribution of the moiré fringes to be obtained directly. Strain measurement result of a MEMS structure demonstrates the feasibility of the two methods.

Theoretical calculations and performance results of a PZT thin film actuator.

PubMed

Hoffmann, Marcus; Küppers, Hartmut; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

2003-10-01

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 microm, the actuator was designed with a cantilever length of 300 microm to 1000 microm. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.

Adaptive UAV Attitude Estimation Employing Unscented Kalman Filter, FOAM and Low-Cost MEMS Sensors

PubMed Central

de Marina, Héctor García; Espinosa, Felipe; Santos, Carlos

2012-01-01

Navigation employing low cost MicroElectroMechanical Systems (MEMS) sensors in Unmanned Aerial Vehicles (UAVs) is an uprising challenge. One important part of this navigation is the right estimation of the attitude angles. Most of the existent algorithms handle the sensor readings in a fixed way, leading to large errors in different mission stages like take-off aerobatic maneuvers. This paper presents an adaptive method to estimate these angles using off-the-shelf components. This paper introduces an Attitude Heading Reference System (AHRS) based on the Unscented Kalman Filter (UKF) using the Fast Optimal Attitude Matrix (FOAM) algorithm as the observation model. The performance of the method is assessed through simulations. Moreover, field experiments are presented using a real fixed-wing UAV. The proposed low cost solution, implemented in a microcontroller, shows a satisfactory real time performance. PMID:23012559

A biomimetic accelerometer inspired by the cricket's clavate hair

PubMed Central

Droogendijk, H.; de Boer, M. J.; Sanders, R. G. P.; Krijnen, G. J. M.

2014-01-01

Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a one-axis biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. An analytical model is presented for the design of the accelerometer, and guidelines are derived to reduce responsivity due to flow-induced contributions to the accelerometer's output. Measurements show that this microelectromechanical systems (MEMS) hair-based accelerometer has a resonance frequency of 320 Hz, a detection threshold of 0.10 ms−2 and a dynamic range of more than 35 dB. The accelerometer exhibits a clear directional response to external accelerations and a low responsivity to airflow. Further, the accelerometer's physical limits with respect to noise levels are addressed and the possibility for short-term adaptation of the sensor to the environment is discussed. PMID:24920115

Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer

DOEpatents

Oh, Yunje; Cyrankowski, Edward; Shan, Zhiwei; Asif, Syed Amanula Syed

2013-05-07

A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.

Micro/nano-mechanical test system employing tensile test holder with push-to-pull transformer

DOEpatents

Oh, Yunje; Cyrankowski, Edward; Shan, Zhiwei; Syed Asif, Syed Amanula

2014-07-29

A micromachined or microelectromechanical system (MEMS) based push-to-pull mechanical transformer for tensile testing of micro-to-nanometer scale material samples including a first structure and a second structure. The second structure is coupled to the first structure by at least one flexible element that enables the second structure to be moveable relative to the first structure, wherein the second structure is disposed relative to the first structure so as to form a pulling gap between the first and second structures such that when an external pushing force is applied to and pushes the second structure in a tensile extension direction a width of the pulling gap increases so as to apply a tensile force to a test sample mounted across the pulling gap between a first sample mounting area on the first structure and a second sample mounting area on the second structure.

Tailorable stimulated Brillouin scattering in nanoscale silicon waveguides.

PubMed

Shin, Heedeuk; Qiu, Wenjun; Jarecki, Robert; Cox, Jonathan A; Olsson, Roy H; Starbuck, Andrew; Wang, Zheng; Rakich, Peter T

2013-01-01

Nanoscale modal confinement is known to radically enhance the effect of intrinsic Kerr and Raman nonlinearities within nanophotonic silicon waveguides. By contrast, stimulated Brillouin-scattering nonlinearities, which involve coherent coupling between guided photon and phonon modes, are stifled in conventional nanophotonics, preventing the realization of a host of Brillouin-based signal-processing technologies in silicon. Here we demonstrate stimulated Brillouin scattering in silicon waveguides, for the first time, through a new class of hybrid photonic-phononic waveguides. Tailorable travelling-wave forward-stimulated Brillouin scattering is realized-with over 1,000 times larger nonlinearity than reported in previous systems-yielding strong Brillouin coupling to phonons from 1 to 18 GHz. Experiments show that radiation pressures, produced by subwavelength modal confinement, yield enhancement of Brillouin nonlinearity beyond those of material nonlinearity alone. In addition, such enhanced and wideband coherent phonon emission paves the way towards the hybridization of silicon photonics, microelectromechanical systems and CMOS signal-processing technologies on chip.

Multi-stage phononic crystal structure for anchor-loss reduction of thin-film piezoelectric-on-silicon microelectromechanical-system resonator

NASA Astrophysics Data System (ADS)

Bao, Fei-Hong; Bao, Lei-Lei; Li, Xin-Yi; Ammar Khan, Muhammad; Wu, Hua-Ye; Qin, Feng; Zhang, Ting; Zhang, Yi; Bao, Jing-Fu; Zhang, Xiao-Sheng

2018-06-01

Thin-film piezoelectric-on-silicon acoustic wave resonators are promising for the development of system-on-chip integrated circuits with micro/nano-engineered timing reference. However, in order to realize their large potentials, a further enhancement of the quality factor (Q) is required. In this study, a novel approach, based on a multi-stage phononic crystal (PnC) structure, was proposed to achieve an ultra-high Q. A systematical study revealed that the multi-stage PnC structure formed a frequency-selective band-gap to effectively prohibit the dissipation of acoustic waves through tethers, which significantly reduced the anchor loss, leading to an insertion-loss reduction and enhancement of Q. The maximum unloaded Q u of the fabricated resonators reached the value of ∼10,000 at 109.85 MHz, indicating an enhancement by 19.4 times.

Nanobonding: A key technology for emerging applications in health and environmental sciences

NASA Astrophysics Data System (ADS)

Howlader, Matiar M. R.; Deen, M. Jamal; Suga, Tadatomo

2015-03-01

In this paper, surface-activation-based nanobonding technology and its applications are described. This bonding technology allows for the integration of electronic, photonic, fluidic and mechanical components into small form-factor systems for emerging sensing and imaging applications in health and environmental sciences. Here, we describe four different nanobonding techniques that have been used for the integration of various substrates — silicon, gallium arsenide, glass, and gold. We use these substrates to create electronic (silicon), photonic (silicon and gallium arsenide), microelectromechanical (glass and silicon), and fluidic (silicon and glass) components for biosensing and bioimaging systems being developed. Our nanobonding technologies provide void-free, strong, and nanometer scale bonding at room temperature or at low temperatures (<200 °C), and do not require chemicals, adhesives, or high external pressure. The interfaces of the nanobonded materials in ultra-high vacuum and in air correspond to covalent bonds, and hydrogen or hydroxyl bonds, respectively.

Design of a micromachined terahertz electromagnetic crystals (EMXT) channel-drop filter on silicon-substrate

NASA Astrophysics Data System (ADS)

Zhou, Kai; Liu, Yong; Si, Liming; Lv, Xin

2013-08-01

An integrated 0.5 THz electromagnetic crystals(EMXT) channel-drop filter based on PBG structure is presented in this paper. A channel-drop filter is a device in which a narrow bandwidth is redirected to another "drop" waveguide while other frequencies are unaffected. It's capable of extracting a certain frequency from a continuous spectrum in the bus channel and passing it to the test channel. It has potential applications in photonic integrated circuits, radio astronomy, THz spectroscopy, THz communication and remote sensing radar receiver. PBG structures(or photonic crystals) are periodic structures which possess band gaps, where the electromagnetic wave of certain ranges of frequencies cannot pass through and is reflected. The proposed channel-drop filter consists of input waveguide,output waveguide and PBG structure. The proposed filter is simulated using the finite element method and can be fabricated by micro-electromechanical systems (MEMS) technology,due to its low cost, high performance and high processing precision.The filter operation principle and fabrication process are discussed.The simulation results show its ability to filter the frequency of 496GHz with a linewidth of approximately 4GHz and transmission of 27.2 dB above background.The loss at resonant frequency is less than 1dB considering the thickness and roughness of gold layer required by the MEMS process.The channel drop efficiency is 84%.

Fabrication of microelectromechanical systems (MEMS) cantilevers for photoacoustic (PA) detection of terahertz (THz) radiation

NASA Astrophysics Data System (ADS)

Newberry, R.; Glauvitz, N.; Coutu, R. A.; Medvedev, I. R.; Petkie, D.

2014-03-01

Historically, spectroscopy has been a cumbersome endeavor due to the relatively large sizes (3ft - 100ft in length) of modern spectroscopy systems. Taking advantage of the photoacoustic effect would allow for much smaller absorption chambers since the photoacoustic (PA) effect is independent of the absorption path length. In order to detect the photoacoustic waves being generated, a photoacoustic microphone would be required. This paper reports on the fabrication efforts taken in order to create microelectromechanical systems (MEMS) cantilevers for the purpose of sensing photoacoustic waves generated via terahertz (THz) radiation passing through a gaseous sample. The cantilevers are first modeled through the use of the finite element modeling software, CoventorWare®. The cantilevers fabricated with bulk micromachining processes and are 7x2x0.010mm on a silicon-on-insulator (SOI) wafer which acts as the physical structure of the cantilever. The devices are released by etching through the wafer's backside and etching through the buried oxide with hydrofluoric acid. The cantilevers are placed in a test chamber and their vibration and deflection are measured via a Michelson type interferometer that reflects a laser off a gold tip evaporated onto the tip of the cantilever. The test chamber is machined from stainless steel and housed in a THz testing environment at Wright State University. Fabricated devices have decreased residual stress and larger radii of curvatures by approximately 10X.

Mitigating Thermoelastic Dissipation of Flexural Micromechanical Resonators by Decoupling Resonant Frequency from Thermal Relaxation Rate

NASA Astrophysics Data System (ADS)

Zhou, Xin; Xiao, Dingbang; Wu, Xuezhong; Li, Qingsong; Hou, Zhanqiang; He, Kaixuan; Wu, Yulie

2017-12-01

This paper reports an alternative design strategy to reduce thermoelastic dissipation (TED) for isothermal-mode micromechanical resonators. This involves hanging lumped masses on a frame structure to decouple the resonant frequency and the effective beamwidth of the resonators, which enables the separation of the thermal relaxation rate and frequency of vibration. This approach is validated using silicon-based micromechanical disklike resonators engineered to isolate TED. A threefold improvement in the quality factor and a tenfold improvement in the decay-time constant is demonstrated. This work proposes a solution for isothermal-mode (flexural) micromechanical resonators to effectively mitigate TED. Specifically, this approach is ideal for designing high-performance gyroscope resonators based on microelectromechanical systems (MEMS) technology. It may pave the way for the next generation inertial-grade MEMS gyroscope, which remains a great challenge and is very appealing.

Nanotwinned metal MEMS films with unprecedented strength and stability

PubMed Central

Sim, Gi-Dong; Krogstad, Jessica A.; Reddy, K. Madhav; Xie, Kelvin Y.; Valentino, Gianna M.; Weihs, Timothy P.; Hemker, Kevin J.

2017-01-01

Silicon-based microelectromechanical systems (MEMS) sensors have become ubiquitous in consumer-based products, but realization of an interconnected network of MEMS devices that allows components to be remotely monitored and controlled, a concept often described as the “Internet of Things,” will require a suite of MEMS materials and properties that are not currently available. We report on the synthesis of metallic nickel-molybdenum-tungsten films with direct current sputter deposition, which results in fully dense crystallographically textured films that are filled with nanotwins. These films exhibit linear elastic mechanical behavior and tensile strengths exceeding 3 GPa, which is unprecedented for materials that are compatible with wafer-level device fabrication processes. The ultrahigh strength is attributed to a combination of solid solution strengthening and the presence of dense nanotwins. These films also have excellent thermal and mechanical stability, high density, and electrical properties that are attractive for next-generation metal MEMS applications. PMID:28782015

Flux concentration and modulation based magnetoresistive sensor with integrated planar compensation coils

NASA Astrophysics Data System (ADS)

Tian, Wugang; Hu, Jiafei; Pan, Mengchun; Chen, Dixiang; Zhao, Jianqiang

2013-03-01

1/f noise is one of the main noise sources of magnetoresistive (MR) sensors, which can cause intrinsic detection limit at low frequency. To suppress this noise, the solution of flux concentration and vertical motion modulation (VMM) has been proposed. Magnetic hysteresis in MR sensors is another problem, which degrades their response linearity and detection ability. To reduce this impact, the method of pulse magnetization and magnetic compensation field with integrated planar coils has been introduced. A flux concentration and VMM based magnetoresistive prototype sensor with integrated planar coils was fabricated using microelectromechanical-system technology. The response linearity of the prototype sensors is improved from 0.8% to 0.12%. The noise level is reduced near to the thermal noise level, and the low-frequency detection ability of the prototype sensor is enhanced with a factor of more than 80.

Demodulation of an optical fiber MEMS pressure sensor based on single bandpass microwave photonic filter.

PubMed

Wang, Yiping; Ni, Xiaoqi; Wang, Ming; Cui, Yifeng; Shi, Qingyun

2017-01-23

In this paper, a demodulation method for optic fiber micro-electromechanical systems (MEMS) extrinsic Fabry-Perot interferometer (EFPI) pressure sensor exploiting microwave photonics filter technique is firstly proposed and experimentally demonstrated. A single bandpass microwave photonic filter (MPF) which mainly consists of a spectrum-sliced light source, a pressurized optical fiber MEMS EFPI, a phase modulator (PM) and a length of dispersion compensating fiber (DCF) is demonstrated. The frequency response of the filter with respect to the pressure is studied. By detecting the resonance frequency shifts of the MPF, the pressure can be determined. The theoretical and experimental results show that the proposed EFPI pressure demodulation method has a higher resolution and higher speed than traditional methods based on optical spectrum analysis. The sensitivity of the sensor is measured to be as high as 86 MHz/MPa in the range of 0-4Mpa. Moreover, the sensitivity can be easily adjusted.

Comparison of mechanical characteristics of focused ion beam fabricated silicon nanowires

NASA Astrophysics Data System (ADS)

Ina, Ginnosuke; Fujii, Tatsuya; Kozeki, Takahiro; Miura, Eri; Inoue, Shozo; Namazu, Takahiro

2017-06-01

In this study, we investigate the effects of focused ion beam (FIB)-induced damage and specimen size on the mechanical properties of Si nanowires (NWs) by a microelectromechanical system (MEMS)-based tensile testing technique. By an FIB fabrication technique, three types of Si NWs, which are as-FIB-fabricated, annealed, and FIB-implanted NWs, are prepared. A sacrificial-oxidized NW is also prepared to compare the mechanical properties of these FIB-based NWs. The quasi-static uniaxial tensile tests of all the NWs are conducted by scanning electron microscopy (SEM). The fabrication process and specimen size dependences on Young’s modulus and fracture strength are observed. Annealing is effective for improving the Young’s modulus of the FIB-damaged Si. Transmission electron microscopy (TEM) suggests that the mechanism behind the process dependence on the mechanical characteristics is related to the crystallinity of the FIB-damaged portion.

Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications

PubMed Central

Lee, Chi-Yuan; Lin, Chien-Hen; Lo, Yi-Man

2011-01-01

Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance. PMID:22163817

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

NASA Astrophysics Data System (ADS)

Nogami, Hirofumi; Kobayashi, Takeshi; Okada, Hironao; Masuda, Takashi; Maeda, Ryutaro; Itoh, Toshihiro

2012-09-01

An animal health monitoring system and a wireless sensor node aimed at preventing the spread of animal-transmitted diseases and improving pastoral efficiency which are especially suitable for chickens, were developed. The sensor node uses a piezoelectric microelectromechanical system (MEMS) device and an event-driven system that is activated by the movements of a chicken. The piezoelectric MEMS device has two functions: a) it measures the activity of a chicken and b) switches the micro-control unit (MCU) of the wireless sensor node from the sleep mode. The piezoelectric MEMS device is required to produce high output voltages when the chicken moves. However, after the piezoelectric MEMS device was reflowed to the wireless sensor node, the output voltages of the piezoelectric MEMS device decreased. The main reason for this might be the loss of residual polarization, which is affected by the thermal load during the reflow process. After the reflow process, we were not able to apply a voltage to the piezoelectric MEMS device; thus, the piezoelectric output voltage was not increased by repoling the piezoelectric MEMS device. To address the thermal load of the reflow process, we established a thermal poling treatment, which achieves a higher temperature than the reflow process. We found that on increasing the thermal poling temperature, the piezoelectric output voltages did not decreased low significantly. Thus, we considered that a thermal poling temperature higher than that of the reflow process prevents the piezoelectric output voltage reduction caused by the thermal load.

A Novel MEMS Gyro North Finder Design Based on the Rotation Modulation Technique

PubMed Central

Zhang, Yongjian; Zhou, Bin; Song, Mingliang; Hou, Bo; Xing, Haifeng; Zhang, Rong

2017-01-01

Gyro north finders have been widely used in maneuvering weapon orientation, oil drilling and other areas. This paper proposes a novel Micro-Electro-Mechanical System (MEMS) gyroscope north finder based on the rotation modulation (RM) technique. Two rotation modulation modes (static and dynamic modulation) are applied. Compared to the traditional gyro north finders, only one single MEMS gyroscope and one MEMS accelerometer are needed, reducing the total cost since high-precision gyroscopes and accelerometers are the most expensive components in gyro north finders. To reduce the volume and enhance the reliability, wireless power and wireless data transmission technique are introduced into the rotation modulation system for the first time. To enhance the system robustness, the robust least square method (RLSM) and robust Kalman filter (RKF) are applied in the static and dynamic north finding methods, respectively. Experimental characterization resulted in a static accuracy of 0.66° and a dynamic repeatability accuracy of 1°, respectively, confirming the excellent potential of the novel north finding system. The proposed single gyro and single accelerometer north finding scheme is universal, and can be an important reference to both scientific research and industrial applications. PMID:28452936

Control Issues for Microelectromechanical Systems

DTIC Science & Technology

2006-04-01

par- ticular, electrostatic drives suffer from electromechani- cal instabilities such as lateral pull -in, side pull -in, and lateral instability...standard robust feed- back methods can compensate for lateral pull -in and signifi- cantly extend the range of travel of the mechanical shuttle. MEMS...DAAD19-02-1-0366 and NSF GOALI BES 0201773. REFERENCES [1] J. Bryzek, E. Abbott, A. Flannery, D. Cagle, and J. Maitan, “Control issues for MEMS,” in

A Novel MicroElectroMechanical System (MEMS) Device for Passive Sampling of Hydrophobic Compounds

DTIC Science & Technology

2011-05-01

bioavailability  Samplers are removed, extracted for CoC, analyzed ▬ For organics: solid phase micro extraction ( SPME ) fibers, semi- permeable membrane...devices (SPMD), polyoxymethylene (POM) ▬ For metals: diffuse gradients in thin films (DGT) SPME fiber ESTCP project, Reible and Lotufo Applications to...Predict Bioaccumulation You et al. 2006, EST, 40: 6348 SPME concentrations were predictive of tissue concentrations of PCBs in field-contaminated

Direct etch method for microfludic channel and nanoheight post-fabrication by picoliter droplets

NASA Astrophysics Data System (ADS)

Demirci, Utkan; Toner, Mehmet

2006-01-01

Photolithography is an expensive and significant step in microfabrication. Approaches that could change lithography would create an impact on semiconductor industry and microelectromechanical systems technologies. We demonstrate a direct etching method by ejecting etchant droplets at desired locations by using microdroplet ejector arrays. This method could be used for easy fabrication of poly(dimethylsiloxane) microfluidic channels and nanometer height postlike structures in microfluidic channels.

Utilizing Microelectromechanical Systems (MEMS) Micro-Shutter Designs for Adaptive Coded Aperture Imaging (ACAI) Technologies

DTIC Science & Technology

2009-03-01

52 Figure 4-1: Applied voltage versus deflection curve for Poly1/Poly2 stacked 300-μm single hot-arm actuator (shown on right...58 Figure 4-2: Applied voltage versus deflection curve for Poly1/Poly2 stacked 300-μm double hot-arm actuator (shown on...61 Figure 4-5: Deflection vs. power curves for an individual wedge from

Low-temperature technique for thick film resist stabilization and curing

NASA Astrophysics Data System (ADS)

Minter, Jason P.; Wong, Selmer S.; Marlowe, Trey; Ross, Matthew F.; Narcy, Mark E.; Livesay, William R.

1999-06-01

For a range of thick film photoresist applications, including MeV ion implant processing, thin film head manufacturing, and microelectromechanical systems processing, there is a need for a low-temperature method for resist stabilization and curing. Traditional methods of stabilizing or curing resist films have relied on thermal cycling, which may not be desirable due to device temperature limitations or thermally-induced distortion of the resist features.

Microsystems: from technologies to products

NASA Astrophysics Data System (ADS)

Ryser, Peter

2003-10-01

In this paper, we outline the process leading from technologies to successful products in the MEMS (Microelectromechanical Systems) and MST (Microsystems Technology) field. The development of new products involves a lot of factors, such as mature technologies, interdisciplinary team, identifying the right business potential and long term oriented investors. The paper summarizes a survey of different technologies and point out that packaging, test and calibration are still major shortcomings for the concerned industries.

A Survey of Wireless Sensor Network Based Air Pollution Monitoring Systems

PubMed Central

Yi, Wei Ying; Lo, Kin Ming; Mak, Terrence; Leung, Kwong Sak; Leung, Yee; Meng, Mei Ling

2015-01-01

The air quality in urban areas is a major concern in modern cities due to significant impacts of air pollution on public health, global environment, and worldwide economy. Recent studies reveal the importance of micro-level pollution information, including human personal exposure and acute exposure to air pollutants. A real-time system with high spatio-temporal resolution is essential because of the limited data availability and non-scalability of conventional air pollution monitoring systems. Currently, researchers focus on the concept of The Next Generation Air Pollution Monitoring System (TNGAPMS) and have achieved significant breakthroughs by utilizing the advance sensing technologies, MicroElectroMechanical Systems (MEMS) and Wireless Sensor Network (WSN). However, there exist potential problems of these newly proposed systems, namely the lack of 3D data acquisition ability and the flexibility of the sensor network. In this paper, we classify the existing works into three categories as Static Sensor Network (SSN), Community Sensor Network (CSN) and Vehicle Sensor Network (VSN) based on the carriers of the sensors. Comprehensive reviews and comparisons among these three types of sensor networks were also performed. Last but not least, we discuss the limitations of the existing works and conclude the objectives that we want to achieve in future systems. PMID:26703598

A Survey of Wireless Sensor Network Based Air Pollution Monitoring Systems.

PubMed

Yi, Wei Ying; Lo, Kin Ming; Mak, Terrence; Leung, Kwong Sak; Leung, Yee; Meng, Mei Ling

2015-12-12

The air quality in urban areas is a major concern in modern cities due to significant impacts of air pollution on public health, global environment, and worldwide economy. Recent studies reveal the importance of micro-level pollution information, including human personal exposure and acute exposure to air pollutants. A real-time system with high spatio-temporal resolution is essential because of the limited data availability and non-scalability of conventional air pollution monitoring systems. Currently, researchers focus on the concept of The Next Generation Air Pollution Monitoring System (TNGAPMS) and have achieved significant breakthroughs by utilizing the advance sensing technologies, MicroElectroMechanical Systems (MEMS) and Wireless Sensor Network (WSN). However, there exist potential problems of these newly proposed systems, namely the lack of 3D data acquisition ability and the flexibility of the sensor network. In this paper, we classify the existing works into three categories as Static Sensor Network (SSN), Community Sensor Network (CSN) and Vehicle Sensor Network (VSN) based on the carriers of the sensors. Comprehensive reviews and comparisons among these three types of sensor networks were also performed. Last but not least, we discuss the limitations of the existing works and conclude the objectives that we want to achieve in future systems.

Enhanced Sensitivity of Novel Surface Acoustic Wave Microelectromechanical System-Interdigital Transducer Gyroscope

NASA Astrophysics Data System (ADS)

Wang, Wen; Oh, Haekwan; Lee, Keekeun; Yoon, Sungjin; Yang, Sangsik

2009-06-01

In this paper, we present a novel microelectromechanical system-interdigital transducer (MEMS-IDT) surface acoustic wave (SAW) gyroscope with an 80 MHz central frequency on a 128° YX LiNbO3 wafer. The developed MEMS-IDT gyroscope is composed of a two-port SAW resonator, a dual delay line oscillator, and metallic dots. The SAW resonator provides a stable standing wave, and the vibrating metallic dot at an antinode of the standing wave induces the second SAW in the normal direction of its vibrating axis. The dual delay line oscillator detects the Coriolis force by comparing the resonant frequencies between two oscillators through the interference effect. The coupling of mode (COM) modeling was used to extract the optimal design parameters prior to fabrication. In the electrical testing by the network analyzer, the fabricated SAW resonator and delay lines showed low insertion loss and similar operation frequencies between a resonator and delay lines. When the device was rotated, the resonant frequency differences between two oscillators linearly varied owing to the Coriolis force. The obtained sensitivity was approximately 119 Hz deg-1 s-1 in the angular rate range of 0-1000 deg/s. Satisfactory linearity and superior directivity were also observed in the test.

Modular magazine for suitable handling of microparts in industry

NASA Astrophysics Data System (ADS)

Grimme, Ralf; Schmutz, Wolfgang; Schlenker, Dirk; Schuenemann, Matthias; Stock, Achim; Schaefer, Wolfgang

1998-01-01

Microassembly and microadjustment techniques are key technologies in the industrial production of hybrid microelectromechanical systems. One focal point in current microproduction research and engineering is the design and development of high-precision microassembly and microadjustment equipment capable of operating within the framework of flexible automated industrial production. As well as these developments, suitable microassembly tools for industrial use also need to be equipped with interfaces for the supply and delivery of microcomponents. The microassembly process necessitates the supply of microparts in a geometrically defined manner. In order to reduce processing steps and production costs, there is a demand for magazines capable of providing free accessibility to the fixed microcomponents. Commonly used at present are feeding techniques, which originate from the field of semiconductor production. However none of these techniques fully meets the requirements of industrial microassembly technology. A novel modular magazine set, developed and tested in a joint project, is presented here. The magazines are able to hold microcomponents during cleaning, inspection and assembly without nay additional handling steps. The modularity of their design allows for maximum technical flexibility. The modular magazine fits into currently practiced SEMI standards. The design and concept of the magazine enables industrial manufacturers to promote a cost-efficient and flexible precision assembly of microelectromechanical systems.

The Influence of Pd-Doped Au Wire Bonding on HAZ Microstructure and Looping Profile in Micro-Electromechanical Systems (MEMS) Packaging

NASA Astrophysics Data System (ADS)

Ismail, Roslina; Omar, Ghazali; Jalar, Azman; Majlis, Burhanuddin Yeop

2015-07-01

Wire bonding processes has been widely adopted in micro-electromechanical systems (MEMS) packaging especially in biomedical devices for the integration of components. In the first process sequence in wire bonding, the zone along the wire near the melted tips is called the heat-affected zone (HAZ). The HAZ plays an important factor that influenced the looping profiles of wire bonding process. This paper investigates the effect of dopants on microstructures in the HAZ. One precent palladium (Pd) was added to the as-drawn 4N gold wire and annealed at 600°C. The addition of Pd was able to moderate the grain growth in the HAZ by retarding the heat propagation to the wire. In the formation of the looping profile, the first bending point of the looping is highly associated with the length of the HAZ. The alloyed gold wire (2N gold) has a sharp angle at a distance of about 30 m from the neck of the wire with a measured bending radius of about 40 mm and bending angle of about 40° clockwise from vertical axis, while the 4N gold wire bends at a longer distance. It also shows that the HAZ for 4N gold is longer than 2N gold wire.

Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers

NASA Astrophysics Data System (ADS)

Xie, Tuqiang; Xie, Huikai; Fedder, Gary K.; Pan, Yingtian

2003-11-01

Experimental results of a modified micromachined microelectromechanical systems (MEMS) mirror for substantial enhancement of the transverse laser scanning performance of endoscopic optical coherence tomography (EOCT) are presented. Image distortion due to buckling of MEMS mirror in our previous designs was analyzed and found to be attributed to excessive internal stress of the transverse bimorph meshes. The modified MEMS mirror completely eliminates bimorph stress and the resultant buckling effect, which increases the wobbling-free angular optical actuation to greater than 37°, exceeding the transverse laser scanning requirements for EOCT and confocal endoscopy. The new optical coherence tomography (OCT) endoscope allows for two-dimensional cross-sectional imaging that covers an area of 4.2 mm × 2.8 mm (limited by scope size) and at roughly 5 frames/s instead of the previous area size of 2.9 mm × 2.8 mm and is highly suitable for noninvasive and high-resolution imaging diagnosis of epithelial lesions in vivo. EOCT images of normal rat bladders and rat bladder cancers are compared with the same cross sections acquired with conventional bench-top OCT. The results clearly demonstrate the potential of EOCT for in vivo imaging diagnosis and precise guidance for excisional biopsy of early bladder cancers.

A Theoretical and Experimental Comparison of 3-3 and 3-1 Mode Piezoelectric Microelectromechanical Systems (MEMS)

PubMed Central

Kim, Donghwan; Hewa-Kasakarage, Nishshanka; Hall, Neal A.

2014-01-01

Two piezoelectric transducer modes applied in microelectromechanical systems are (i) the 3-1 mode with parallel electrodes perpendicular to a vertical polarization vector, and (ii) the 3-3 mode which uses interdigitated (IDT) electrodes to realize an in-plane polarization vector. This study compares the two configurations by deriving a Norton equivalent representation of each approach – including expressions for output charge and device capacitance. The model is verified using a microfabricated device comprised of multiple epitaxial silicon beams with sol-gel deposited lead zirconate titanate at the surface. The beams have identical dimensions and are attached to a common moving element at their tip. The only difference between beams is electrode configuration – enabling a direct comparison. Capacitance and charge measurements verify the presented theory with high accuracy. The Norton equivalent representation is general and enables comparison of any figure of merit, including electromechanical coupling coefficient and signal to noise ratio. With respect to coupling coefficient, the experimentally validated theory in this work suggests that 3-3 mode IDT-electrode configurations offer the potential for modest improvements compared against 3-1 mode devices (less than 2×), and the only geometrical parameter affecting this ratio is the fill factor of the IDT electrode. PMID:25309041

Micromachining of a bimorph Pb(Zr,Ti)O3 (PZT) cantilever using a micro-electromechanical systems (MEMS) process for energy harvesting application.

PubMed

Kim, Moonkeun; Hwang, Beomseok; Jeong, Jaehwa; Min, Nam Ki; Kwon, Kwang-Ho

2012-07-01

We designed and fabricated a bimorph Pb(Zr,Ti)O3 (PZT) cantilever with an integrated Si proof mass to obtain a low resonant frequency for an energy harvesting application. The cantilevers were fabricated on the micro-electromechanical systems (MEMS) scale. A mode of piezoelectric conversions were d31 and d33 mode in cantilever vibration Therefore, we designed and fabricated a single cantilever with d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes. Finally, we fabricated a device with beam dimensions of about 5,400 microm x 480 microm x 14 microm (< +/- 5%), and an integrated Si proof mass with dimensions of about 1,481 microm x 988 microm x 450 microm (< +/- 5%). In order to measure the d31 and d33 modes, we fabricated top and bottom electrodes. The distance between the top electrodes was 50 microm and the resonant frequency was 89.4 Hz. The average powers of the d31 unimorph, d31 bimorph, d33 unimorph, and d33 bimorph modes were 3.90, 9.60, 21.42, and 22.47 nW at 0.8 g (g = 9.8 m/s2) and optimal resistance, respectively.

Differential GNSS and Vision-Based Tracking to Improve Navigation Performance in Cooperative Multi-UAV Systems.

PubMed

Vetrella, Amedeo Rodi; Fasano, Giancarmine; Accardo, Domenico; Moccia, Antonio

2016-12-17

Autonomous navigation of micro-UAVs is typically based on the integration of low cost Global Navigation Satellite System (GNSS) receivers and Micro-Electro-Mechanical Systems (MEMS)-based inertial and magnetic sensors to stabilize and control the flight. The resulting navigation performance in terms of position and attitude accuracy may not suffice for other mission needs, such as the ones relevant to fine sensor pointing. In this framework, this paper presents a cooperative UAV navigation algorithm that allows a chief vehicle, equipped with inertial and magnetic sensors, a Global Positioning System (GPS) receiver, and a vision system, to improve its navigation performance (in real time or in the post processing phase) exploiting formation flying deputy vehicles equipped with GPS receivers. The focus is set on outdoor environments and the key concept is to exploit differential GPS among vehicles and vision-based tracking (DGPS/Vision) to build a virtual additional navigation sensor whose information is then integrated in a sensor fusion algorithm based on an Extended Kalman Filter. The developed concept and processing architecture are described, with a focus on DGPS/Vision attitude determination algorithm. Performance assessment is carried out on the basis of both numerical simulations and flight tests. In the latter ones, navigation estimates derived from the DGPS/Vision approach are compared with those provided by the onboard autopilot system of a customized quadrotor. The analysis shows the potential of the developed approach, mainly deriving from the possibility to exploit magnetic- and inertial-independent accurate attitude information.

INS/GNSS Integration for Aerobatic Flight Applications and Aircraft Motion Surveying.

PubMed

V Hinüber, Edgar L; Reimer, Christian; Schneider, Tim; Stock, Michael

2017-04-26

This paper presents field tests of challenging flight applications obtained with a new family of lightweight low-power INS/GNSS ( inertial navigation system/global satellite navigation system ) solutions based on MEMS ( micro-electro-mechanical- sensor ) machined sensors, being used for UAV ( unmanned aerial vehicle ) navigation and control as well as for aircraft motion dynamics analysis and trajectory surveying. One key is a 42+ state extended Kalman-filter-based powerful data fusion, which also allows the estimation and correction of parameters that are typically affected by sensor aging, especially when applying MEMS-based inertial sensors, and which is not yet deeply considered in the literature. The paper presents the general system architecture, which allows iMAR Navigation the integration of all classes of inertial sensors and GNSS ( global navigation satellite system ) receivers from very-low-cost MEMS and high performance MEMS over FOG ( fiber optical gyro ) and RLG ( ring laser gyro ) up to HRG ( hemispherical resonator gyro ) technology, and presents detailed flight test results obtained under extreme flight conditions. As a real-world example, the aerobatic maneuvers of the World Champion 2016 (Red Bull Air Race) are presented. Short consideration is also given to surveying applications, where the ultimate performance of the same data fusion, but applied on gravimetric surveying, is discussed.

INS/GNSS Integration for Aerobatic Flight Applications and Aircraft Motion Surveying

PubMed Central

v. Hinüber, Edgar L.; Reimer, Christian; Schneider, Tim; Stock, Michael

2017-01-01

This paper presents field tests of challenging flight applications obtained with a new family of lightweight low-power INS/GNSS (inertial navigation system/global satellite navigation system) solutions based on MEMS (micro-electro-mechanical- sensor) machined sensors, being used for UAV (unmanned aerial vehicle) navigation and control as well as for aircraft motion dynamics analysis and trajectory surveying. One key is a 42+ state extended Kalman-filter-based powerful data fusion, which also allows the estimation and correction of parameters that are typically affected by sensor aging, especially when applying MEMS-based inertial sensors, and which is not yet deeply considered in the literature. The paper presents the general system architecture, which allows iMAR Navigation the integration of all classes of inertial sensors and GNSS (global navigation satellite system) receivers from very-low-cost MEMS and high performance MEMS over FOG (fiber optical gyro) and RLG (ring laser gyro) up to HRG (hemispherical resonator gyro) technology, and presents detailed flight test results obtained under extreme flight conditions. As a real-world example, the aerobatic maneuvers of the World Champion 2016 (Red Bull Air Race) are presented. Short consideration is also given to surveying applications, where the ultimate performance of the same data fusion, but applied on gravimetric surveying, is discussed. PMID:28445417

Microfabricated cylindrical ion trap

DOEpatents

Blain, Matthew G.

2005-03-22

A microscale cylindrical ion trap, having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale cylindrical ion trap to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The microscale CIT has a reduced ion mean free path, allowing operation at higher pressures with less expensive and less bulky vacuum pumping system, and with lower battery power than conventional- and miniature-sized ion traps. The reduced electrode voltage enables integration of the microscale cylindrical ion trap with on-chip integrated circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of microscale cylindrical ion traps can be realized in truly field portable, handheld microanalysis systems.

Ledge-type Co/L1{sub 0}-FePt exchange-coupled composites

DOE Office of Scientific and Technical Information (OSTI.GOV)

Speliotis, Th.; Giannopoulos, G.; Niarchos, D.

2016-06-21

FePt-based exchange-coupled composites consisting of a magnetically hard L1{sub 0}-FePt phase exchange-coupled with a soft ferromagnetic material are promising candidates for future ultra-high density (>1 Tbit/in{sup 2}) perpendicular magnetic recording media, also being of interest for other applications including spin torque oscillators and micro-electro-mechanical systems, among others. In this paper, the effect of the thickness of a soft Co layer (3 < th{sub Co} < 20 nm) on the magnetic behavior of ledge-type fcc(100)-Co/L1{sub 0}(001)-FePt composites deposited on an MgO (100) substrate is systematically studied by combining morpho-structural analyses and angular magnetization measurements. Starting from a film consisting of isolated L1{submore » 0}(001)–FePt islands, the ledge-type structure was obtained by depositing a Co layer that either covered the FePt islands or filled-up the inter-island region, gradually forming a continuous layer with increasing Co thickness. A perpendicular anisotropy was maintained up to th{sub Co} ∼ 9.5 nm and a significant reduction in the coercivity (about 50% for th{sub Co} ∼ 3 nm) with the increase in th{sub Co} was observed, indicating that, by coupling hard FePt and soft Co phases in a ledge-type configuration, the writability can be greatly improved. Recoil loops' measurements confirmed the exchange-coupled behavior, reinforcing a potential interest in these systems for future magnetic recording media.« less

A precision structured smart hydrogel for sensing applications

NASA Astrophysics Data System (ADS)

Menges, J.; Kleinschmidt, P.; Bart, H.-J.; Oesterschulze, E.

2017-10-01

We report on a macroinitiator based smart hydrogel film applied on a microcantilever for sensing applications. The studied hydrogel features a comparatively wide dynamic range for changes in the electrolyte's ionic strength. Furthermore, it offers a simple spin coating process for thin film deposition as well as the capability to obtain high aspect ratio microstructures by reactive ion etching. This makes the hydrogel compatible to microelectromechanical system integration. As a proof of concept, we study the response of hydrogel functionalized cantilevers in aqueous sodium chloride solutions of varying ionic strength. In contrast to the majority of hydrogel materials reported in the literature, we found that our hydrogel still responds in high ionic strength environments. This may be of future interest for sensing e.g., in sea water or physiological environments like urine.

Lumped-parameters equivalent circuit for condenser microphones modeling.

PubMed

Esteves, Josué; Rufer, Libor; Ekeom, Didace; Basrour, Skandar

2017-10-01

This work presents a lumped parameters equivalent model of condenser microphone based on analogies between acoustic, mechanical, fluidic, and electrical domains. Parameters of the model were determined mainly through analytical relations and/or finite element method (FEM) simulations. Special attention was paid to the air gap modeling and to the use of proper boundary condition. Corresponding lumped-parameters were obtained as results of FEM simulations. Because of its simplicity, the model allows a fast simulation and is readily usable for microphone design. This work shows the validation of the equivalent circuit on three real cases of capacitive microphones, including both traditional and Micro-Electro-Mechanical Systems structures. In all cases, it has been demonstrated that the sensitivity and other related data obtained from the equivalent circuit are in very good agreement with available measurement data.

Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure

DOE Office of Scientific and Technical Information (OSTI.GOV)

Grau, Mario, E-mail: mario.grau@hs-rm.de; Völklein, Friedemann; Meier, Andreas

A method for measuring the thermal accommodation coefficient α for surface-/gas interfaces is presented. It allows the determination of α for thin films produced by a variety of deposition technologies, such as chemical vapor deposition, physical vapor deposition, and atomic layer deposition (ALD). The setup is based on two microelectromechanical systems (MEMS) Pirani sensors facing each other in a defined positioning. Because these MEMS sensors show a very high sensitivity in their individual molecular flow regimes, it is possible to measure the accommodation coefficients of gases without the disturbing influence of the transition regime. This paper presents the analytical backgroundmore » and the actual measurement principle. The results for air and nitrogen molecules on sputtered Au and Pt surfaces are presented.« less

Novel Carbon Dioxide Microsensor Based on Tin Oxide Nanomaterial Doped With Copper Oxide

NASA Technical Reports Server (NTRS)

Xu, Jennifer C.; Hunter, Gary W.; Lukco, Dorothy; Liu, Chung-Chiun; Ward, Benjamin J.

2008-01-01

Carbon dioxide (CO2) is one of the major indicators of fire and therefore its measurement is very important for low-false-alarm fire detection and emissions monitoring. However, only a limited number of CO2 sensing materials exist due to the high chemical stability of CO2. In this work, a novel CO2 microsensor based on nanocrystalline tin oxide (SnO2) doped with copper oxide (CuO) has been successfully demonstrated. The CuO-SnO2 based CO2 microsensors are fabricated by means of microelectromechanical systems (MEMS) technology and sol-gel nanomaterial-synthesis processes. At a doping level of CuO: SnO2 = 1:8 (molar ratio), the resistance of the sensor has a linear response to CO2 concentrations for the range of 1 to 4 percent CO2 in air at 450 C. This approach has demonstrated the use of SnO2, typically used for the detection of reducing gases, in the detection of an oxidizing gas.

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range

PubMed Central

Wang, Wei; Chen, Jiapin; Zivkovic, Aleksandar. S.; Xie, Huikai

2016-01-01

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror’s full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work. PMID:27690047

Density change and viscous flow during structural relaxation of plasma-enhanced chemical-vapor-deposited silicon oxide films

NASA Astrophysics Data System (ADS)

Cao, Zhiqiang; Zhang, Xin

2004-10-01

The structural relaxation of plasma-enhanced chemical-vapor-deposited (PECVD) silane-based silicon oxide films during thermal cycling and annealing has been studied using wafer curvature measurements. These measurements, which determine stress in the amorphous silicon oxide films, are sensitive to both plastic deformation and density changes. A quantitative case study of such changes has been done based upon the experimental results. A microstructure-based mechanism elucidates seams as a source of density change and voids as a source of plastic deformation, accompanied by a viscous flow. This theory was then used to explain a series of experimental results that are related to thermal cycling as well as annealing of PECVD silicon oxide films including stress hysteresis generation and reduction and coefficient of thermal-expansion changes. In particular, the thickness effect was examined; PECVD silicon oxide films with a thickness varying from 1to40μm were studied, as certain demanding applications in microelectromechanical systems require such thick films serving as heat/electrical insulation layers.

MEMS-based thin-film fuel cells

DOEpatents

Jankowksi, Alan F.; Morse, Jeffrey D.

2003-10-28

A micro-electro-mechanical systems (MEMS) based thin-film fuel cells for electrical power applications. The MEMS-based fuel cell may be of a solid oxide type (SOFC), a solid polymer type (SPFC), or a proton exchange membrane type (PEMFC), and each fuel cell basically consists of an anode and a cathode separated by an electrolyte layer. Additionally catalyst layers can also separate the electrodes (cathode and anode) from the electrolyte. Gas manifolds are utilized to transport the fuel and oxidant to each cell and provide a path for exhaust gases. The electrical current generated from each cell is drawn away with an interconnect and support structure integrated with the gas manifold. The fuel cells utilize integrated resistive heaters for efficient heating of the materials. By combining MEMS technology with thin-film deposition technology, thin-film fuel cells having microflow channels and full-integrated circuitry can be produced that will lower the operating temperature an will yield an order of magnitude greater power density than the currently known fuel cells.

Microelectromechanical resonator and method for fabrication

DOEpatents

Wittwer, Jonathan W [Albuquerque, NM; Olsson, Roy H [Albuquerque, NM

2009-11-10

A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, a pattern of holes is formed in the resonator mass with the position, size and number of holes in the pattern being optimized to minimize an uncertainty .DELTA.f in the resonant frequency f.sub.0 of the MEM resonator due to manufacturing process variations (e.g. edge bias). A number of different types of MEM resonators are disclosed which can be formed using this method, including capacitively transduced Lame, wineglass and extensional resonators, and piezoelectric length-extensional resonators.

Microelectromechanical resonator and method for fabrication

DOEpatents

Wittwer, Jonathan W [Albuquerque, NM; Olsson, Roy H [Albuquerque, NM

2010-01-26

A method is disclosed for the robust fabrication of a microelectromechanical (MEM) resonator. In this method, a pattern of holes is formed in the resonator mass with the position, size and number of holes in the pattern being optimized to minimize an uncertainty .DELTA.f in the resonant frequency f.sub.0 of the MEM resonator due to manufacturing process variations (e.g. edge bias). A number of different types of MEM resonators are disclosed which can be formed using this method, including capacitively transduced Lame, wineglass and extensional resonators, and piezoelectric length-extensional resonators.

Method for integrating microelectromechanical devices with electronic circuitry

DOEpatents

Montague, S.; Smith, J.H.; Sniegowski, J.J.; McWhorter, P.J.

1998-08-25

A method is disclosed for integrating one or more microelectromechanical (MEM) devices with electronic circuitry. The method comprises the steps of forming each MEM device within a cavity below a device surface of the substrate; encapsulating the MEM device prior to forming electronic circuitry on the substrate; and releasing the MEM device for operation after fabrication of the electronic circuitry. Planarization of the encapsulated MEM device prior to formation of the electronic circuitry allows the use of standard processing steps for fabrication of the electronic circuitry. 13 figs.

Performance Characteristic Mems-Based IMUs for UAVs Navigation

NASA Astrophysics Data System (ADS)

Mohamed, H. A.; Hansen, J. M.; Elhabiby, M. M.; El-Sheimy, N.; Sesay, A. B.

2015-08-01

Accurate 3D reconstruction has become essential for non-traditional mapping applications such as urban planning, mining industry, environmental monitoring, navigation, surveillance, pipeline inspection, infrastructure monitoring, landslide hazard analysis, indoor localization, and military simulation. The needs of these applications cannot be satisfied by traditional mapping, which is based on dedicated data acquisition systems designed for mapping purposes. Recent advances in hardware and software development have made it possible to conduct accurate 3D mapping without using costly and high-end data acquisition systems. Low-cost digital cameras, laser scanners, and navigation systems can provide accurate mapping if they are properly integrated at the hardware and software levels. Unmanned Aerial Vehicles (UAVs) are emerging as a mobile mapping platform that can provide additional economical and practical advantages. However, such economical and practical requirements need navigation systems that can provide uninterrupted navigation solution. Hence, testing the performance characteristics of Micro-Electro-Mechanical Systems (MEMS) or low cost navigation sensors for various UAV applications is important research. This work focuses on studying the performance characteristics under different manoeuvres using inertial measurements integrated with single point positioning, Real-Time-Kinematic (RTK), and additional navigational aiding sensors. Furthermore, the performance of the inertial sensors is tested during Global Positioning System (GPS) signal outage.

Multi-Sensor Based Online Attitude Estimation and Stability Measurement of Articulated Heavy Vehicles.

PubMed

Zhu, Qingyuan; Xiao, Chunsheng; Hu, Huosheng; Liu, Yuanhui; Wu, Jinjin

2018-01-13

Articulated wheel loaders used in the construction industry are heavy vehicles and have poor stability and a high rate of accidents because of the unpredictable changes of their body posture, mass and centroid position in complex operation environments. This paper presents a novel distributed multi-sensor system for real-time attitude estimation and stability measurement of articulated wheel loaders to improve their safety and stability. Four attitude and heading reference systems (AHRS) are constructed using micro-electro-mechanical system (MEMS) sensors, and installed on the front body, rear body, rear axis and boom of an articulated wheel loader to detect its attitude. A complementary filtering algorithm is deployed for sensor data fusion in the system so that steady state margin angle (SSMA) can be measured in real time and used as the judge index of rollover stability. Experiments are conducted on a prototype wheel loader, and results show that the proposed multi-sensor system is able to detect potential unstable states of an articulated wheel loader in real-time and with high accuracy.

Combined, solid-state molecular property and gamma spectrometers for CBRNE detection

NASA Astrophysics Data System (ADS)

Rogers, Ben; Grate, Jay; Pearson, Brett; Gallagher, Neal; Wise, Barry; Whitten, Ralph; Adams, Jesse

2013-05-01

Nevada Nanotech Systems, Inc. (Nevada Nano) has developed a multi-sensor solution to Chemical, Biological, Radiological, Nuclear and Explosives (CBRNE) detection that combines the Molecular Property Spectrometer™ (MPS™)—a micro-electro-mechanical chip-based technology capable of measuring a variety of thermodynamic and electrostatic molecular properties of sampled vapors and particles—and a compact, high-resolution, solid-state gamma spectrometer module for identifying radioactive materials, including isotopes used in dirty bombs and nuclear weapons. By conducting multiple measurements, the system can provide a more complete characterization of an unknown sample, leading to a more accurate identification. Positive identifications of threats are communicated using an integrated wireless module. Currently, system development is focused on detection of commercial, military and improvised explosives, radioactive materials, and chemical threats. The system can be configured for a variety of CBRNE applications, including handheld wands and swab-type threat detectors requiring short sample times, and ultra-high sensitivity detectors in which longer sampling times are used. Here we provide an overview of the system design and operation and present results from preliminary testing.

Multi-Sensor Based Online Attitude Estimation and Stability Measurement of Articulated Heavy Vehicles

PubMed Central

Xiao, Chunsheng; Liu, Yuanhui; Wu, Jinjin

2018-01-01

Articulated wheel loaders used in the construction industry are heavy vehicles and have poor stability and a high rate of accidents because of the unpredictable changes of their body posture, mass and centroid position in complex operation environments. This paper presents a novel distributed multi-sensor system for real-time attitude estimation and stability measurement of articulated wheel loaders to improve their safety and stability. Four attitude and heading reference systems (AHRS) are constructed using micro-electro-mechanical system (MEMS) sensors, and installed on the front body, rear body, rear axis and boom of an articulated wheel loader to detect its attitude. A complementary filtering algorithm is deployed for sensor data fusion in the system so that steady state margin angle (SSMA) can be measured in real time and used as the judge index of rollover stability. Experiments are conducted on a prototype wheel loader, and results show that the proposed multi-sensor system is able to detect potential unstable states of an articulated wheel loader in real-time and with high accuracy. PMID:29342850

A nano grating tunable MEMS optical filter for high-speed on-chip multispectral fluorescent detection.

PubMed

Truxal, Steven C; Huang, Nien-Tsu; Kurabayashi, Katsuo

2009-01-01

We report a microelectromechanical (MEMS) tunable optical filter and its integration in a fluorescence microscope for high speed on-chip spectral measurements. This integration allows for measurements of any fluorescence sample placed onto the microscope stage. We demonstrate the system capabilities by taking spectral measurements of multicolor fluorescent beads and fluorescently labeled cells passing through a microfluidic cytometer. The system has applications in biological studies where the measurement of multiple fluorescent peaks is restricted by the detection method's speed and sensitivity.

MEMS scanning micromirror for optical coherence tomography.

PubMed

Strathman, Matthew; Liu, Yunbo; Keeler, Ethan G; Song, Mingli; Baran, Utku; Xi, Jiefeng; Sun, Ming-Ting; Wang, Ruikang; Li, Xingde; Lin, Lih Y

2015-01-01

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a standard gastroesophageal endoscope. This work employs advanced image processing techniques to enhance the images acquired using the MEMS scanner to correct non-idealities in mirror performance. The experimental results demonstrate the effectiveness of the proposed technique.

MEMS scanning micromirror for optical coherence tomography

PubMed Central

Strathman, Matthew; Liu, Yunbo; Keeler, Ethan G.; Song, Mingli; Baran, Utku; Xi, Jiefeng; Sun, Ming-Ting; Wang, Ruikang; Li, Xingde; Lin, Lih Y.

2014-01-01

This paper describes an endoscopic-inspired imaging system employing a micro-electromechanical system (MEMS) micromirror scanner to achieve beam scanning for optical coherence tomography (OCT) imaging. Miniaturization of a scanning mirror using MEMS technology can allow a fully functional imaging probe to be contained in a package sufficiently small for utilization in a working channel of a standard gastroesophageal endoscope. This work employs advanced image processing techniques to enhance the images acquired using the MEMS scanner to correct non-idealities in mirror performance. The experimental results demonstrate the effectiveness of the proposed technique. PMID:25657887

Magnetic field response of doubly clamped magnetoelectric microelectromechanical AlN-FeCo resonators

NASA Astrophysics Data System (ADS)

Bennett, S. P.; Baldwin, J. W.; Staruch, M.; Matis, B. R.; LaComb, J.; van't Erve, O. M. J.; Bussmann, K.; Metzler, M.; Gottron, N.; Zappone, W.; LaComb, R.; Finkel, P.

2017-12-01

Magnetoelectric (ME) cantilever resonators have been successfully employed as magnetic sensors to measure low magnetic fields; however, high relative resolution enabling magnetometry in high magnetic fields is lacking. Here, we present on-chip silicon based ME microelectromechanical (MEMS) doubly clamped resonators which can be utilized as high sensitivity, low power magnetic sensors. The resonator is a fully suspended thin film ME heterostructure composed of an active magnetoelastic layer (Fe0.3Co0.7), which is strain coupled to a piezoelectric signal/excitation layer (AlN). By controlling uniaxial stress arising from the large magnetoelastic properties of magnetostrictive FeCo, a magnetically driven shift of the resonance frequency of the first fundamental flexural mode is observed. The theoretical intrinsic magnetic noise floor of such sensors reaches a minimum value of 35 p T /√{H z }. This approach shows a magnetic field sensitivity of ˜5 Hz/mT in a bias magnetic field of up to 120 mT. Such sensors have the potential in applications required for enhanced dynamic sensitivity in high-field magnetometry.

A fully integrated oven controlled microelectromechanical oscillator – Part II. Characterization and measurement

DOE PAGES

Wojciechowski, Kenneth E.; Olsson, Roy H.

2015-06-24

Our paper reports the measurement and characterization of a fully integrated oven controlled microelectromechanical oscillator (OCMO). The OCMO takes advantage of high thermal isolation and monolithic integration of both aluminum nitride (AlN) micromechanical resonators and electronic circuitry to thermally stabilize or ovenize all the components that comprise an oscillator. Operation at microscale sizes allows implementation of high thermal resistance platform supports that enable thermal stabilization at very low-power levels when compared with the state-of-the-art oven controlled crystal oscillators. A prototype OCMO has been demonstrated with a measured temperature stability of -1.2 ppb/°C, over the commercial temperature range while using tensmore » of milliwatts of supply power and with a volume of 2.3 mm 3 (not including the printed circuit board-based thermal control loop). Additionally, due to its small thermal time constant, the thermal compensation loop can maintain stability during fast thermal transients (>10 °C/min). This new technology has resulted in a new paradigm in terms of power, size, and warm up time for high thermal stability oscillators.« less

Metallic coatings of microelectromechanical structures at low temperatures: Stress, elasticity, and nonlinear dissipation

NASA Astrophysics Data System (ADS)

Collin, E.; Kofler, J.; Lakhloufi, S.; Pairis, S.; Bunkov, Yu. M.; Godfrin, H.

2010-06-01

We present mechanical measurements performed at low temperatures on cantilever-based microelectromechanical structures coated with a metallic layer. Two very different coatings are presented in order to illustrate the capabilities of the present approach, namely (soft) aluminum and (hard) niobium oxide. The temperature is used as a control parameter to access materials properties. We benefit from low temperature techniques to extract a phase-resolved measurement of the first mechanical resonance mode in cryogenic vacuum. By repeating the experiment on the same samples, after multiple metallic depositions, we can determine accurately the contribution of the coating layers to the mechanical properties in terms of surface stress, additional mass, additional elasticity, and damping. Analytic theoretical expressions are derived and used to fit the data. Taking advantage of the extremely broad dynamic range provided by the technique, we can measure the anelasticity of the thin metallic film. The key parameters describing the metals' dynamics are analyzed in an original way in order to provide new experimental grounds for future theoretical modelings of the underlying mechanisms.

Method for integrating microelectromechanical devices with electronic circuitry

DOEpatents

Barron, Carole C.; Fleming, James G.; Montague, Stephen

1999-01-01

A method is disclosed for integrating one or more microelectromechanical (MEM) devices with electronic circuitry on a common substrate. The MEM device can be fabricated within a substrate cavity and encapsulated with a sacrificial material. This allows the MEM device to be annealed and the substrate planarized prior to forming electronic circuitry on the substrate using a series of standard processing steps. After fabrication of the electronic circuitry, the electronic circuitry can be protected by a two-ply protection layer of titanium nitride (TiN) and tungsten (W) during an etch release process whereby the MEM device is released for operation by etching away a portion of a sacrificial material (e.g. silicon dioxide or a silicate glass) that encapsulates the MEM device. The etch release process is preferably performed using a mixture of hydrofluoric acid (HF) and hydrochloric acid (HCI) which reduces the time for releasing the MEM device compared to use of a buffered oxide etchant. After release of the MEM device, the TiN:W protection layer can be removed with a peroxide-based etchant without damaging the electronic circuitry.

Micromechanical apparatus for measurement of forces

DOEpatents

Tanner, Danelle Mary; Allen, James Joe

2004-05-25

A new class of micromechanical dynamometers has been disclosed which are particularly suited to fabrication in parallel with other microelectromechanical apparatus. Forces in the microNewton regime and below can be measured with such dynamometers which are based on a high-compliance deflection element (e.g. a ring or annulus) suspended above a substrate for deflection by an applied force, and one or more distance scales for optically measuring the deflection.

MEMS tracking mirror system for a bidirectional free-space optical link.

PubMed

Jeon, Sungho; Toshiyoshi, Hiroshi

2017-08-20

We report on a bidirectional free-space optical system that is capable of automatic connection and tracking of an optical link between two nodes. A piezoelectric micro-electro-mechanical systems (MEMS) optical scanner is used to steer a laser beam of two wavelengths superposed to visually present a communication zone, to search for the position of the remote node by means of the retro-reflector optics, and to transmit the data between the nodes. A feedback system is developed to control the MEMS scanner to dynamically establish the optical link within a 10-ms transition time and to keep track of the moving node.

Two-Axis Direct Fluid Shear Stress Sensor for Aerodynamic Applications

NASA Technical Reports Server (NTRS)

Bajikar, Sateesh S.; Scott, Michael A.; Adcock, Edward E.

2011-01-01

This miniature or micro-sized semiconductor sensor design provides direct, nonintrusive measurement of skin friction or wall shear stress in fluid flow situations in a two-axis configuration. The sensor is fabricated by microelectromechanical system (MEMS) technology, enabling small size and multiple, low-cost reproductions. The sensors may be fabricated by bonding a sensing element wafer to a fluid-coupling element wafer. Using this layered machine structure provides a truly three-dimensional device.

Real-Time Detection of Telomerase in a Microelectromechanical Systems Platform

DTIC Science & Technology

2005-05-01

contains color images. 14. ABSTRACT 15. SUBJECT TERMS 16. SECURITY CLASSIFICATION OF: 17. LIMITATION OF ABSTRACT UU 18. NUMBER OF PAGES 147 19a...Telomerase accomplishes this by alleviating the “end-replication problem” (6,10,14,23,33,43). First described by Hayflick in 1965, the end-replication...were produced to determine the minimum detection limit of the ABI Prism 7000 as an optical fluorescent detection device. In addition, I wanted to

Macro-magnetic Modeling of the ARL Microelectromechanical System (MEMS) Flux Concentrator

DTIC Science & Technology

2011-09-01

are drawn as solid pieces and assigned the material properties of permalloy (nickel-iron [ NiFe ]) with a permeability of 5,000 as that is a value...energy densities, and saturation. The modeling process consists of drawing the objects of interest, assigning properties (coercivity, permeability...that is readily achieved in thin films of the material. The material properties assigned to this background are those of a vacuum, with a relative

Applicability of Time-Averaged Holography for Micro-Electro-Mechanical System Performing Non-Linear Oscillations

PubMed Central

Palevicius, Paulius; Ragulskis, Minvydas; Palevicius, Arvydas; Ostasevicius, Vytautas

2014-01-01

Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms. PMID:24451467

Fatigue and Fracture of Polycrystalline Silicon and Diamond MEMS at Room and Elevated Temperatures

DTIC Science & Technology

2006-12-01

amorphous diamond-like carbon (ta-C) and polycrystalline silicon ( polysilicon ) for microelectromechanical systems (MEMS). Polysilicon and ta-C test...toughness were obtained, many of them for the first time. Compared to polysilicon , ta-C was found to have superior mechanical properties: Its fracture...toughness and strength were 3.5 times and two times that of polysilicon , respectively. Its elastic modulus was 4.5 times that of polysilicon and its

Strain, temperature, and electric-field effects on the phase transition and piezoelectric responses of K0.5Na0.5NbO3 thin films

NASA Astrophysics Data System (ADS)

Zhou, Meng-Jun; Wang, Jian-Jun; Chen, Long-Qing; Nan, Ce-Wen

2018-04-01

A KNbO3-based solid solution system is environmentally friendly with good electromechanical performance. This work established the misfit strain-strain and temperature-strain phase diagrams for K0.5Na0.5NbO3 thin films and calculated the polarization switching, phase transition, and piezoelectric responses of K0.5Na0.5NbO3 thin films under various strains, temperatures, and electric fields. The results show that the piezoelectric coefficient d33 can be enhanced near the phase boundaries. For the ferroelectric phase with a nonzero out-of-plane polarization component, an optimal electric field is identified for maximizing d33, which is desired in applications such as thin-film piezoelectric micro-electromechanical systems, transducers for ultrasound medical imaging, and energy harvesting. The present results are expected to provide guidance for the future experimental study of KxNa1-xNbO3 thin films and the optimization of ferroelectric thin film-based devices.

Monolithic acoustic graphene transistors based on lithium niobate thin film

NASA Astrophysics Data System (ADS)

Liang, J.; Liu, B.-H.; Zhang, H.-X.; Zhang, H.; Zhang, M.-L.; Zhang, D.-H.; Pang, W.

2018-05-01

This paper introduces an on-chip acoustic graphene transistor based on lithium niobate thin film. The graphene transistor is embedded in a microelectromechanical systems (MEMS) acoustic wave device, and surface acoustic waves generated by the resonator induce a macroscopic current in the graphene due to the acousto-electric (AE) effect. The acoustic resonator and the graphene share the lithium niobate film, and a gate voltage is applied through the back side of the silicon substrate. The AE current induced by the Rayleigh and Sezawa modes was investigated, and the transistor outputs a larger current in the Rayleigh mode because of a larger coupling to velocity ratio. The output current increases linearly with the input radiofrequency power and can be effectively modulated by the gate voltage. The acoustic graphene transistor realized a five-fold enhancement in the output current at an optimum gate voltage, outperforming its counterpart with a DC input. The acoustic graphene transistor demonstrates a paradigm for more-than-Moore technology. By combining the benefits of MEMS and graphene circuits, it opens an avenue for various system-on-chip applications.

A MEMS SOI-based piezoresistive fluid flow sensor

NASA Astrophysics Data System (ADS)

Tian, B.; Li, H. F.; Yang, H.; Song, D. L.; Bai, X. W.; Zhao, Y. L.

2018-02-01

In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 × 10-4 V ms2/kg.

Microelectromechanical gyroscope

DOEpatents

Garcia, Ernest J.

1999-01-01

A gyroscope powered by an engine, all fabricated on a common substrate in the form of an integrated circuit. Preferably, both the gyroscope and the engine are fabricated in the micrometer domain, although in some embodiments of the present invention, the gyroscope can be fabricated in the millimeter domain. The engine disclosed herein provides torque to the gyroscope rotor for continuous rotation at varying speeds and direction. The present invention is preferably fabricated of polysilicon or other suitable materials on a single wafer using surface micromachining batch fabrication techniques or millimachining techniques that are well known in the art. Fabrication of the present invention is preferably accomplished without the need for assembly of multiple wafers which require alignment and bonding, and without piece-part assembly.

A novel Gravity-FREAK feature extraction and Gravity-KLT tracking registration algorithm based on iPhone MEMS mobile sensor in mobile environment

PubMed Central

Lin, Fan; Xiao, Bin

2017-01-01

Based on the traditional Fast Retina Keypoint (FREAK) feature description algorithm, this paper proposed a Gravity-FREAK feature description algorithm based on Micro-electromechanical Systems (MEMS) sensor to overcome the limited computing performance and memory resources of mobile devices and further improve the reality interaction experience of clients through digital information added to the real world by augmented reality technology. The algorithm takes the gravity projection vector corresponding to the feature point as its feature orientation, which saved the time of calculating the neighborhood gray gradient of each feature point, reduced the cost of calculation and improved the accuracy of feature extraction. In the case of registration method of matching and tracking natural features, the adaptive and generic corner detection based on the Gravity-FREAK matching purification algorithm was used to eliminate abnormal matches, and Gravity Kaneda-Lucas Tracking (KLT) algorithm based on MEMS sensor can be used for the tracking registration of the targets and robustness improvement of tracking registration algorithm under mobile environment. PMID:29088228

A novel Gravity-FREAK feature extraction and Gravity-KLT tracking registration algorithm based on iPhone MEMS mobile sensor in mobile environment.

PubMed

Hong, Zhiling; Lin, Fan; Xiao, Bin

2017-01-01

Based on the traditional Fast Retina Keypoint (FREAK) feature description algorithm, this paper proposed a Gravity-FREAK feature description algorithm based on Micro-electromechanical Systems (MEMS) sensor to overcome the limited computing performance and memory resources of mobile devices and further improve the reality interaction experience of clients through digital information added to the real world by augmented reality technology. The algorithm takes the gravity projection vector corresponding to the feature point as its feature orientation, which saved the time of calculating the neighborhood gray gradient of each feature point, reduced the cost of calculation and improved the accuracy of feature extraction. In the case of registration method of matching and tracking natural features, the adaptive and generic corner detection based on the Gravity-FREAK matching purification algorithm was used to eliminate abnormal matches, and Gravity Kaneda-Lucas Tracking (KLT) algorithm based on MEMS sensor can be used for the tracking registration of the targets and robustness improvement of tracking registration algorithm under mobile environment.

Rapid earthquake characterization using MEMS accelerometers and volunteer hosts following the M 7.2 Darfield, New Zealand, Earthquake

USGS Publications Warehouse

Lawrence, J. F.; Cochran, E.S.; Chung, A.; Kaiser, A.; Christensen, C. M.; Allen, R.; Baker, J.W.; Fry, B.; Heaton, T.; Kilb, Debi; Kohler, M.D.; Taufer, M.

2014-01-01

We test the feasibility of rapidly detecting and characterizing earthquakes with the Quake‐Catcher Network (QCN) that connects low‐cost microelectromechanical systems accelerometers to a network of volunteer‐owned, Internet‐connected computers. Following the 3 September 2010 M 7.2 Darfield, New Zealand, earthquake we installed over 180 QCN sensors in the Christchurch region to record the aftershock sequence. The sensors are monitored continuously by the host computer and send trigger reports to the central server. The central server correlates incoming triggers to detect when an earthquake has occurred. The location and magnitude are then rapidly estimated from a minimal set of received ground‐motion parameters. Full seismic time series are typically not retrieved for tens of minutes or even hours after an event. We benchmark the QCN real‐time detection performance against the GNS Science GeoNet earthquake catalog. Under normal network operations, QCN detects and characterizes earthquakes within 9.1 s of the earthquake rupture and determines the magnitude within 1 magnitude unit of that reported in the GNS catalog for 90% of the detections.

Development of Testing Methodologies for the Mechanical Properties of MEMS

NASA Technical Reports Server (NTRS)

Ekwaro-Osire, Stephen

2003-01-01

This effort is to investigate and design testing strategies to determine the mechanical properties of MicroElectroMechanical Systems (MEMS) as well as investigate the development of a MEMS Probabilistic Design Methodology (PDM). One item of potential interest is the design of a test for the Weibull size effect in pressure membranes. The Weibull size effect is a consequence of a stochastic strength response predicted from the Weibull distribution. Confirming that MEMS strength is controlled by the Weibull distribution will enable the development of a probabilistic design methodology for MEMS - similar to the GRC developed CARES/Life program for bulk ceramics. However, the primary area of investigation will most likely be analysis and modeling of material interfaces for strength as well as developing a strategy to handle stress singularities at sharp corners, filets, and material interfaces. This will be a continuation of the previous years work. The ultimate objective of this effort is to further develop and verify the ability of the Ceramics Analysis and Reliability Evaluation of Structures Life (CARES/Life) code to predict the time-dependent reliability of MEMS structures subjected to multiple transient loads.

LIDAR pulse coding for high resolution range imaging at improved refresh rate.

PubMed

Kim, Gunzung; Park, Yongwan

2016-10-17

In this study, a light detection and ranging system (LIDAR) was designed that codes pixel location information in its laser pulses using the direct- sequence optical code division multiple access (DS-OCDMA) method in conjunction with a scanning-based microelectromechanical system (MEMS) mirror. This LIDAR can constantly measure the distance without idle listening time for the return of reflected waves because its laser pulses include pixel location information encoded by applying the DS-OCDMA. Therefore, this emits in each bearing direction without waiting for the reflected wave to return. The MEMS mirror is used to deflect and steer the coded laser pulses in the desired bearing direction. The receiver digitizes the received reflected pulses using a low-temperature-grown (LTG) indium gallium arsenide (InGaAs) based photoconductive antenna (PCA) and the time-to-digital converter (TDC) and demodulates them using the DS-OCDMA. When all of the reflected waves corresponding to the pixels forming a range image are received, the proposed LIDAR generates a point cloud based on the time-of-flight (ToF) of each reflected wave. The results of simulations performed on the proposed LIDAR are compared with simulations of existing LIDARs.

Sensing textile seam-line for wearable multimodal physiological monitoring.

PubMed

McKnight, M; Agcayazi, T; Kausche, H; Ghosh, T; Bozkurt, A

2016-08-01

This paper investigates a novel multimodal sensing method by forming seam-lines of conductive textile fibers into commercially available fabrics. The proposed ultra-low cost micro-electro-mechanical sensor would provide, wearable, flexible, textile based biopotential signal recording, wetness detection and tactile sensing simultaneously. Three types of fibers are evaluated for their array-based sensing capability, including a 3D printed conductive fiber, a multiwall carbon nanotube based fiber, and a commercially available stainless steel conductive thread. The sensors were shown to have a correlation between capacitance and pressure; impedance and wetness; and recorded potential and ECG waveforms.

Tensile-stressed microelectromechanical apparatus and micromirrors formed therefrom

DOEpatents

Fleming, James G [Albuquerque, NM

2006-05-16

A microelectromechanical (MEM) apparatus is disclosed which includes one or more tensile-stressed actuators that are coupled through flexures to a stage on a substrate. The tensile-stressed actuators, which can be formed from tensile-stressed tungsten or silicon nitride, initially raise the stage above the substrate without any applied electrical voltage, and can then be used to control the height or tilt angle of the stage. An electrostatic actuator can also be used in combination with each tensile-stressed actuator. The MEM apparatus has applications for forming piston micromirrors or tiltable micromirrors and independently addressable arrays of such devices.

Microelectromechanical power generator and vibration sensor

DOEpatents

Roesler, Alexander W [Tijeras, NM; Christenson, Todd R [Albuquerque, NM

2006-11-28

A microelectromechanical (MEM) apparatus is disclosed which can be used to generate electrical power in response to an external source of vibrations, or to sense the vibrations and generate an electrical output voltage in response thereto. The MEM apparatus utilizes a meandering electrical pickup located near a shuttle which holds a plurality of permanent magnets. Upon movement of the shuttle in response to vibrations coupled thereto, the permanent magnets move in a direction substantially parallel to the meandering electrical pickup, and this generates a voltage across the meandering electrical pickup. The MEM apparatus can be fabricated by LIGA or micromachining.

Dual Mode Thin Film Bulk Acoustic Resonators (FBARs) Based on AlN, ZnO and GaN Films with Tilted c-Axis Orientation

DTIC Science & Technology

2010-01-01

TERMS MEMS , acoustic wave devices, acoustic wave sensors Qing-Ming Wang University of Pittsburgh 123 University Place University Club Pittsburgh, PA...resonators,” Proc. SPIE Vol. 6223, 62230I, Micro ( MEMS ) and Nanotechnologies for Space Applications; Thomas George, Zhong-Yang Cheng; Eds. (May...microelectromechanical resonators has been recognized as a technological challenge in the current microelectronics and MEMS development. The

Gas-driven microturbine

DOEpatents

Sniegowski, Jeffrey J.; Rodgers, Murray S.; McWhorter, Paul J.; Aeschliman, Daniel P.; Miller, William M.

2002-01-01

A microturbine fabricated by a three-level semiconductor batch-fabrication process based on polysilicon surface-micromachining. The microturbine comprises microelectromechanical elements formed from three polysilicon multi-layer surfaces applied to a silicon substrate. Interleaving sacrificial oxide layers provides electrical and physical isolation, and selective etching of both the sacrificial layers and the polysilicon layers allows formation of individual mechanical and electrical elements as well as the required space for necessary movement of rotating turbine parts and linear elements.

High Performance Microbial Fuel Cells and Supercapacitors Using Micro-Electro-Mechanical System (MEMS) Technology

NASA Astrophysics Data System (ADS)

Ren, Hao

A Microbial fuel cell (MFC) is a bio-inspired carbon-neutral, renewable electrochemical converter to extract electricity from catabolic reaction of micro-organisms. It is a promising technology capable of directly converting the abundant biomass on the planet into electricity and potentially alleviate the emerging global warming and energy crisis. The current and power density of MFCs are low compared with conventional energy conversion techniques. Since its debut in 2002, many studies have been performed by adopting a variety of new configurations and structures to improve the power density. The reported maximum areal and volumetric power densities range from 19 mW/m2 to 1.57 W/m2 and from 6.3 W/m3 to 392 W/m 3, respectively, which are still low compared with conventional energy conversion techniques. In this dissertation, the impact of scaling effect on the performance of MFCs are investigated, and it is found that by scaling down the characteristic length of MFCs, the surface area to volume ratio increases and the current and power density improves. As a result, a miniaturized MFC fabricated by Micro-Electro-Mechanical System (MEMS) technology with gold anode is presented in this dissertation, which demonstrate a high power density of 3300 W/m3. The performance of the MEMS MFC is further improved by adopting anodes with higher surface area to volume ratio, such as carbon nanotube (CNT) and graphene based anodes, and the maximum power density is further improved to a record high power density of 11220 W/m3. A novel supercapacitor by regulating the respiration of the bacteria is also presented, and a high power density of 531.2 A/m2 (1,060,000 A/m3) and 197.5 W/m2 (395,000 W/m3), respectively, are marked, which are one to two orders of magnitude higher than any previously reported microbial electrochemical techniques.

Biologically inspired dynamic material systems.

PubMed

Studart, André R

2015-03-09

Numerous examples of material systems that dynamically interact with and adapt to the surrounding environment are found in nature, from hair-based mechanoreceptors in animals to self-shaping seed dispersal units in plants to remodeling bone in vertebrates. Inspired by such fascinating biological structures, a wide range of synthetic material systems have been created to replicate the design concepts of dynamic natural architectures. Examples of biological structures and their man-made counterparts are herein revisited to illustrate how dynamic and adaptive responses emerge from the intimate microscale combination of building blocks with intrinsic nanoscale properties. By using top-down photolithographic methods and bottom-up assembly approaches, biologically inspired dynamic material systems have been created 1) to sense liquid flow with hair-inspired microelectromechanical systems, 2) to autonomously change shape by utilizing plantlike heterogeneous architectures, 3) to homeostatically influence the surrounding environment through self-regulating adaptive surfaces, and 4) to spatially concentrate chemical species by using synthetic microcompartments. The ever-increasing complexity and remarkable functionalities of such synthetic systems offer an encouraging perspective to the rich set of dynamic and adaptive properties that can potentially be implemented in future man-made material systems. © 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Molecular gearing systems

DOE PAGES

Gakh, Andrei A.; Sachleben, Richard A.; Bryan, Jeff C.

1997-11-01

The race to create smaller devices is fueling much of the research in electronics. The competition has intensified with the advent of microelectromechanical systems (MEMS), in which miniaturization is already reaching the dimensional limits imposed by physics of current lithographic techniques. Also, in the realm of biochemistry, evidence is accumulating that certain enzyme complexes are capable of very sophisticated modes of motion. Complex synergistic biochemical complexes driven by sophisticated biomechanical processes are quite common. Their biochemical functions are based on the interplay of mechanical and chemical processes, including allosteric effects. In addition, the complexity of this interplay far exceeds thatmore » of typical chemical reactions. Understanding the behavior of artificial molecular devices as well as complex natural molecular biomechanical systems is difficult. Fortunately, the problem can be successfully resolved by direct molecular engineering of simple molecular systems that can mimic desired mechanical or electronic devices. These molecular systems are called technomimetics (the name is derived, by analogy, from biomimetics). Several classes of molecular systems that can mimic mechanical, electronic, or other features of macroscopic devices have been successfully synthesized by conventional chemical methods during the past two decades. In this article we discuss only one class of such model devices: molecular gearing systems.« less

Differential GNSS and Vision-Based Tracking to Improve Navigation Performance in Cooperative Multi-UAV Systems

PubMed Central

Vetrella, Amedeo Rodi; Fasano, Giancarmine; Accardo, Domenico; Moccia, Antonio

2016-01-01

Autonomous navigation of micro-UAVs is typically based on the integration of low cost Global Navigation Satellite System (GNSS) receivers and Micro-Electro-Mechanical Systems (MEMS)-based inertial and magnetic sensors to stabilize and control the flight. The resulting navigation performance in terms of position and attitude accuracy may not suffice for other mission needs, such as the ones relevant to fine sensor pointing. In this framework, this paper presents a cooperative UAV navigation algorithm that allows a chief vehicle, equipped with inertial and magnetic sensors, a Global Positioning System (GPS) receiver, and a vision system, to improve its navigation performance (in real time or in the post processing phase) exploiting formation flying deputy vehicles equipped with GPS receivers. The focus is set on outdoor environments and the key concept is to exploit differential GPS among vehicles and vision-based tracking (DGPS/Vision) to build a virtual additional navigation sensor whose information is then integrated in a sensor fusion algorithm based on an Extended Kalman Filter. The developed concept and processing architecture are described, with a focus on DGPS/Vision attitude determination algorithm. Performance assessment is carried out on the basis of both numerical simulations and flight tests. In the latter ones, navigation estimates derived from the DGPS/Vision approach are compared with those provided by the onboard autopilot system of a customized quadrotor. The analysis shows the potential of the developed approach, mainly deriving from the possibility to exploit magnetic- and inertial-independent accurate attitude information. PMID:27999318

Stress Analysis of Silicon Carbide Microelectromechanical Systems Using Raman Spectroscopy

DTIC Science & Technology

2003-03-01

conformally coated with SiC[2]...........................4 2.1: Silicon carbide grinding stones or “carborundum” [1...open up contact areas to SiC-2 (mask SiC2_SiC3_VIA). Then, a 1.5 µm- thick SiC “cap” layer (SiC-3) is deposited. Note that the SiC-3 conformally coats ...84 5.2: Surface profile across the teeth of a SiC3 comb drive...........................................85 xi

Massively Parallel Rogue Cell Detection Using Serial Time-Encoded Amplified Microscopy of Inertially Ordered Cells in High-Throughput Flow

DTIC Science & Technology

2012-08-01

techniques and STEAM imager. It couples the high-speed capability of the STEAM imager and differential phase contrast imaging of DIC / Nomarski microscopy...On 10 TPE chips, we obtained 9 homogenous and strong bonds, the failed bond being due to operator error and presence of air bubbles in the TPE...instruments, structural dynamics, and microelectromechanical systems (MEMS) via laser-scanning surface vibrometry , and observation of biomechanical motility

Piezoelectric and Electrostrictive Materials for Transducers Applications. Volume 4

DTIC Science & Technology

1992-01-31

Micromotors ." IEEE. 109-113 (1991). 41. Anita M. Flynn. Lee S. Tavrow. Stephen F. Bart. Rodney A. Brooks. Daniel J. Ehrlich. K. R. Udayakumar and L. Eric...Cross. "Piezoelectric Micromotors for Microrobots." J. Microelectromechanical Systems 1 (1) 47-50 (1992). 4 APPENDIX 35 A STUDY OF YI Ba2 Cti30 7.y...to produce miniature pumps. valves. microsensors and micromotors . This paper reports on the fabrication of thin films that are capable of producing

Implementation of an Optical Readout System for High-Sensitivity Terahertz Microelectromechanical Sensor Array

DTIC Science & Technology

2014-09-01

rod moves about the illumination scene, the pixels in the detector start to flicker . The ‘ flickering ’ effect is due to the metal rod blocking THz...still possible to mitigate convective heat exchange between the sensor and the ambient surroundings. To mitigate the effects of convective heat...detector start to flicker . The ‘ flickering ’ effect is due to the metal rod blocking THz radiation. This effect is more apparent in the video

Near-infrared Compressive Line Sensing Imaging System using Individually Addressable Laser Diode Array

DTIC Science & Technology

2015-05-11

Micromirror Device (DMD) is a microelectromechanical (MEMS) device. A DMD consists of millions of electrostatically actuated micro- mirrors (or pixels...digital micromirror device) were analyzed. We discussed the effort of developing such a prototype by Proc. of SPIE Vol. 9484 94840I-11 Downloaded...to Digital Micromirror Device (DMD) Technology”, (n.d.) Retrieved May 1, 2011, from http://www.ti.com/lit/an/dlpa008a/dlpa008a.pdf. [16

Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O3-based thin film on (111)Si wafer

NASA Astrophysics Data System (ADS)

Hayasaka, Takeshi; Yoshida, Shinya; Tanaka, Shuji

2017-07-01

This paper reports on the development of a novel buffer layer structure, (100)SrRuO3/(100)LaNiO3/(111)Pt/(111)CeO2, for the epitaxial growth of a (100)/(001)-oriented Pb(Zr,Ti)O3 (PZT)-based thin film on a (111)Si wafer. (111)Pt and (111)CeO2 were epitaxially grown on (111)Si straightforwardly. Then, the crystal orientation was forcibly changed from (111) to (100) at the LaNiO3 layer owing to its strong (100)-self-orientation property, which enabled the cube-on-cube epitaxial growth of the subsequent (100)SrRuO3 layer and preferentially (100)/(001)-oriented PZT-based thin film. The PZT-based epitaxial thin films were comprehensively characterized in terms of the crystallinity, in-plane epitaxial relationships, piezoelectricity, and so forth. This buffer layer structure for the epitaxial growth of PZT can be applied to piezoelectric micro-electro-mechanical systems (MEMS) vibrating ring gyroscopes.

Capillary-driven surface-enhanced Raman scattering (SERS)-based microfluidic chip for abrin detection

NASA Astrophysics Data System (ADS)

Yang, Hao; Deng, Min; Ga, Shan; Chen, Shouhui; Kang, Lin; Wang, Junhong; Xin, Wenwen; Zhang, Tao; You, Zherong; An, Yuan; Wang, Jinglin; Cui, Daxiang

2014-03-01

Herein, we firstly demonstrate the design and the proof-of-concept use of a capillary-driven surface-enhanced Raman scattering (SERS)-based microfluidic chip for abrin detection. The micropillar array substrate was etched and coated with a gold film by microelectromechanical systems (MEMS) process to integrate into a lateral flow test strip. The detection of abrin solutions of various concentrations was performed by the as-prepared microfluidic chip. It was shown that the correlation between the abrin concentration and SERS signal was found to be linear within the range of 0.1 ng/mL to 1 μg/mL with a limit of detection of 0.1 ng/mL. Our microfluidic chip design enhanced the operability of SERS-based immunodiagnostic techniques, significantly reducing the complication and cost of preparation as compared to previous SERS-based works. Meanwhile, this design proved the superiority to conventional lateral flow test strips in respect of both sensitivity and quantitation and showed great potential in the diagnosis and treatment for abrin poisoning as well as on-site screening of abrin-spiked materials.

Recent advances in design and fabrication of on-chip micro-supercapacitors

NASA Astrophysics Data System (ADS)

Beidaghi, Majid; Wang, Chunlei

2012-06-01

Recent development in miniaturized electronic devices has increased the demand for power sources that are sufficiently compact and can potentially be integrated on a chip with other electronic components. Miniaturized electrochemical capacitors (EC) or micro-supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. Recently, we have developed several types of micro-supercapacitors with different structural designs and active materials. Carbon-Microelectromechanical Systems (C-MEMS) with three dimensional (3D) interdigital structures are employed both as electrode material for electric double layer capacitor (EDLC) or as three dimensional (3D) current collectors of pseudo-capacitive materials. More recently, we have also developed microsupercapacitor based on hybrid graphene and carbon nanotube interdigital structures. In this paper, the recent advances in design and fabrication of on-chip micro-supercapacitors are reviewed.

Fabricating micro-instruments in surface-micromachined polycrystalline silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Comtois, J.H.; Michalicek, M.A.; Barron, C.C.

1997-04-01

Smaller, lighter instruments can be fabricated as Micro-Electro-Mechanical Systems (MEMS), having micron scale moving parts packaged together with associated control and measurement electronics. Batch fabrication of these devices will make economical applications such as condition-based machine maintenance and remote sensing. The choice of instrumentation is limited only by the designer`s imagination. This paper presents one genre of MEMS fabrication, surface-micromachined polycrystalline silicon (polysilicon). Two currently available but slightly different polysilicon processes are presented. One is the ARPA-sponsored ``Multi-User MEMS ProcesS`` (MUMPS), available commercially through MCNC; the other is the Sandia National Laboratories ``Sandia Ultra-planar Multilevel MEMS Technology`` (SUMMiT). Example componentsmore » created in both processes will be presented, with an emphasis on actuators, actuator force testing instruments, and incorporating actuators into larger instruments.« less

STS-113 Crew Interviews: John Herrington, Mission Specialist 2

NASA Technical Reports Server (NTRS)

2002-01-01

STS-113 Mission Specialist 2 John Herrington is seen during a prelaunch interview. He answers questions about his inspiration to become an astronaut and his career path, as well as his thoughts on becoming the first Native American in space. He gives details on the mission's goals and significance, which include the transfer of the International Space Station's (ISS) Expedition 6 crew for the Expedition 5 crew, as well as the installation of the ISS's P-1 integrated truss structure. Herrington, who will participate in three EVAs (extravehicular activity), provides details on the installation of the truss structure. He also describes the process of crew transfer, which also involves the transfer of soft goods and scientific experiments, such as the MEMS (microelectromechanical systems)-based Picosatellite Inspector (MEPSI) which will be ejected from the shuttle shortly after it undocks from the ISS.

Implantable Wireless MEMS Sensors for Medical Uses

NASA Technical Reports Server (NTRS)

Chimbayo, Alexander

2006-01-01

Sensors designed and fabricated according to the principles of microelectromechanical systems (MEMS) are being developed for several medical applications in outer space and on Earth. The designs of these sensors are based on a core design family of pressure sensors, small enough to fit into the eye of a needle, that are fabricated by a "dissolved wafer" process. The sensors are expected to be implantable, batteryless, and wireless. They would be both powered and interrogated by hand-held radio transceivers from distances up to about 6 in. (about 15 cm). One type of sensor would be used to measure blood pressure, particularly for congestive heart failure. Another type would be used to monitor fluids in patients who have hydrocephalus (high brain pressure). Still other types would be used to detect errors in delivery of drugs and to help patients having congestive heart failure.

Graphitized silicon carbide microbeams: wafer-level, self-aligned graphene on silicon wafers

NASA Astrophysics Data System (ADS)

Cunning, Benjamin V.; Ahmed, Mohsin; Mishra, Neeraj; Ranjbar Kermany, Atieh; Wood, Barry; Iacopi, Francesca

2014-08-01

Currently proven methods that are used to obtain devices with high-quality graphene on silicon wafers involve the transfer of graphene flakes from a growth substrate, resulting in fundamental limitations for large-scale device fabrication. Moreover, the complex three-dimensional structures of interest for microelectromechanical and nanoelectromechanical systems are hardly compatible with such transfer processes. Here, we introduce a methodology for obtaining thousands of microbeams, made of graphitized silicon carbide on silicon, through a site-selective and wafer-scale approach. A Ni-Cu alloy catalyst mediates a self-aligned graphitization on prepatterned SiC microstructures at a temperature that is compatible with silicon technologies. The graphene nanocoating leads to a dramatically enhanced electrical conductivity, which elevates this approach to an ideal method for the replacement of conductive metal films in silicon carbide-based MEMS and NEMS devices.

Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures.

PubMed

Ma, Cheng-Wen; Lee, Fu-Wei; Liao, Hsin-Hung; Kuo, Wen-Cheng; Yang, Yao-Joe

2015-08-28

We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young's modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system.

Structural design of high-performance capacitive accelerometers using parametric optimization with uncertainties

NASA Astrophysics Data System (ADS)

Teves, André da Costa; Lima, Cícero Ribeiro de; Passaro, Angelo; Silva, Emílio Carlos Nelli

2017-03-01

Electrostatic or capacitive accelerometers are among the highest volume microelectromechanical systems (MEMS) products nowadays. The design of such devices is a complex task, since they depend on many performance requirements, which are often conflicting. Therefore, optimization techniques are often used in the design stage of these MEMS devices. Because of problems with reliability, the technology of MEMS is not yet well established. Thus, in this work, size optimization is combined with the reliability-based design optimization (RBDO) method to improve the performance of accelerometers. To account for uncertainties in the dimensions and material properties of these devices, the first order reliability method is applied to calculate the probabilities involved in the RBDO formulation. Practical examples of bulk-type capacitive accelerometer designs are presented and discussed to evaluate the potential of the implemented RBDO solver.

MEMS-based power generation techniques for implantable biosensing applications.

PubMed

Lueke, Jonathan; Moussa, Walied A

2011-01-01

Implantable biosensing is attractive for both medical monitoring and diagnostic applications. It is possible to monitor phenomena such as physical loads on joints or implants, vital signs, or osseointegration in vivo and in real time. Microelectromechanical (MEMS)-based generation techniques can allow for the autonomous operation of implantable biosensors by generating electrical power to replace or supplement existing battery-based power systems. By supplementing existing battery-based power systems for implantable biosensors, the operational lifetime of the sensor is increased. In addition, the potential for a greater amount of available power allows additional components to be added to the biosensing module, such as computational and wireless and components, improving functionality and performance of the biosensor. Photovoltaic, thermovoltaic, micro fuel cell, electrostatic, electromagnetic, and piezoelectric based generation schemes are evaluated in this paper for applicability for implantable biosensing. MEMS-based generation techniques that harvest ambient energy, such as vibration, are much better suited for implantable biosensing applications than fuel-based approaches, producing up to milliwatts of electrical power. High power density MEMS-based approaches, such as piezoelectric and electromagnetic schemes, allow for supplemental and replacement power schemes for biosensing applications to improve device capabilities and performance. In addition, this may allow for the biosensor to be further miniaturized, reducing the need for relatively large batteries with respect to device size. This would cause the implanted biosensor to be less invasive, increasing the quality of care received by the patient.

MEMS deformable mirror for wavefront correction of large telescopes

NASA Astrophysics Data System (ADS)

Manhart, Sigmund; Vdovin, Gleb; Collings, Neil; Sodnik, Zoran; Nikolov, Susanne; Hupfer, Werner

2017-11-01

A 50 mm diameter membrane mirror was designed and manufactured at TU Delft. It is made from bulk silicon by micromachining - a technology primarily used for micro-electromechanical systems (MEMS). The mirror unit is equipped with 39 actuator electrodes and can be electrostatically deformed to correct wavefront errors in optical imaging systems. Performance tests on the deformable mirror were carried out at Astrium GmbH using a breadboard setup with a wavefront sensor and a closed-loop control system. It was found that the deformable membrane mirror is well suited for correction of low order wavefront errors as they must be expected in lightweighted space telescopes.

Nanoionics-Based Switches for Radio-Frequency Applications

NASA Technical Reports Server (NTRS)

Nessel, James; Lee, Richard

2010-01-01

Nanoionics-based devices have shown promise as alternatives to microelectromechanical systems (MEMS) and semiconductor diode devices for switching radio-frequency (RF) signals in diverse systems. Examples of systems that utilize RF switches include phase shifters for electronically steerable phased-array antennas, multiplexers, cellular telephones and other radio transceivers, and other portable electronic devices. Semiconductor diode switches can operate at low potentials (about 1 to 3 V) and high speeds (switching times of the order of nanoseconds) but are characterized by significant insertion loss, high DC power consumption, low isolation, and generation of third-order harmonics and intermodulation distortion (IMD). MEMS-based switches feature low insertion loss (of the order of 0.2 dB), low DC power consumption (picowatts), high isolation (>30 dB), and low IMD, but contain moving parts, are not highly reliable, and must be operated at high actuation potentials (20 to 60 V) generated and applied by use of complex circuitry. In addition, fabrication of MEMS is complex, involving many processing steps. Nanoionics-based switches offer the superior RF performance and low power consumption of MEMS switches, without need for the high potentials and complex circuitry necessary for operation of MEMS switches. At the same time, nanoionics-based switches offer the high switching speed of semiconductor devices. Also, like semiconductor devices, nanoionics-based switches can be fabricated relatively inexpensively by use of conventional integrated-circuit fabrication techniques. More over, nanoionics-based switches have simple planar structures that can easily be integrated into RF power-distribution circuits.

Load monitoring of aerospace structures utilizing micro-electro-mechanical systems for static and quasi-static loading conditions

NASA Astrophysics Data System (ADS)

Martinez, M.; Rocha, B.; Li, M.; Shi, G.; Beltempo, A.; Rutledge, R.; Yanishevsky, M.

2012-11-01

The National Research Council Canada (NRC) has worked on the development of structural health monitoring (SHM) test platforms for assessing the performance of sensor systems for load monitoring applications. The first SHM platform consists of a 5.5 m cantilever aluminum beam that provides an optimal scenario for evaluating the ability of a load monitoring system to measure bending, torsion and shear loads. The second SHM platform contains an added level of structural complexity, by consisting of aluminum skins with bonded/riveted stringers, typical of an aircraft lower wing structure. These two load monitoring platforms are well characterized and documented, providing loading conditions similar to those encountered during service. In this study, a micro-electro-mechanical system (MEMS) for acquiring data from triads of gyroscopes, accelerometers and magnetometers is described. The system was used to compute changes in angles at discrete stations along the platforms. The angles obtained from the MEMS were used to compute a second, third or fourth order degree polynomial surface from which displacements at every point could be computed. The use of a new Kalman filter was evaluated for angle estimation, from which displacements in the structure were computed. The outputs of the newly developed algorithms were then compared to the displacements obtained from the linear variable displacement transducers connected to the platforms. The displacement curves were subsequently post-processed either analytically, or with the help of a finite element model of the structure, to estimate strains and loads. The estimated strains were compared with baseline strain gauge instrumentation installed on the platforms. This new approach for load monitoring was able to provide accurate estimates of applied strains and shear loads.

A miniature shoe-mounted orientation determination system for accurate indoor heading and trajectory tracking.

PubMed

Zhang, Shengzhi; Yu, Shuai; Liu, Chaojun; Liu, Sheng

2016-06-01

Tracking the position of pedestrian is urgently demanded when the most commonly used GPS (Global Position System) is unavailable. Benefited from the small size, low-power consumption, and relatively high reliability, micro-electro-mechanical system sensors are well suited for GPS-denied indoor pedestrian heading estimation. In this paper, a real-time miniature orientation determination system (MODS) was developed for indoor heading and trajectory tracking based on a novel dual-linear Kalman filter. The proposed filter precludes the impact of geomagnetic distortions on pitch and roll that the heading is subjected to. A robust calibration approach was designed to improve the accuracy of sensors measurements based on a unified sensor model. Online tests were performed on the MODS with an improved turntable. The results demonstrate that the average RMSE (root-mean-square error) of heading estimation is less than 1°. Indoor heading experiments were carried out with the MODS mounted on the shoe of pedestrian. Besides, we integrated the existing MODS into an indoor pedestrian dead reckoning application as an example of its utility in realistic actions. A human attitude-based walking model was developed to calculate the walking distance. Test results indicate that mean percentage error of indoor trajectory tracking achieves 2% of the total walking distance. This paper provides a feasible alternative for accurate indoor heading and trajectory tracking.

Manufacturing process and material selection in concurrent collaborative design of MEMS devices

NASA Astrophysics Data System (ADS)

Zha, Xuan F.; Du, H.

2003-09-01

In this paper we present knowledge of an intensive approach and system for selecting suitable manufacturing processes and materials for microelectromechanical systems (MEMS) devices in concurrent collaborative design environment. In the paper, fundamental issues on MEMS manufacturing process and material selection such as concurrent design framework, manufacturing process and material hierarchies, and selection strategy are first addressed. Then, a fuzzy decision support scheme for a multi-criteria decision-making problem is proposed for estimating, ranking and selecting possible manufacturing processes, materials and their combinations. A Web-based prototype advisory system for the MEMS manufacturing process and material selection, WebMEMS-MASS, is developed based on the client-knowledge server architecture and framework to help the designer find good processes and materials for MEMS devices. The system, as one of the important parts of an advanced simulation and modeling tool for MEMS design, is a concept level process and material selection tool, which can be used as a standalone application or a Java applet via the Web. The running sessions of the system are inter-linked with webpages of tutorials and reference pages to explain the facets, fabrication processes and material choices, and calculations and reasoning in selection are performed using process capability and material property data from a remote Web-based database and interactive knowledge base that can be maintained and updated via the Internet. The use of the developed system including operation scenario, use support, and integration with an MEMS collaborative design system is presented. Finally, an illustration example is provided.

Evaluating Post-Earthquake Building Safety Using Economical MEMS Seismometers

PubMed Central

Yin, Ren-Cheng

2018-01-01

The earthquake early warning (EEW)-research group at National Taiwan University has been developing a microelectromechanical system-based accelerometer called “P-Alert”, designed for issuing EEWs. The main advantage of P-Alert is that it is a relatively economical seismometer. However, because of the expensive nature of commercial hardware for structural health monitoring (SHM) systems, the application of SHM to buildings remains limited. To determine the performance of P-Alert for evaluating post-earthquake building safety, we conducted a series of steel-frame shaking table tests with incremental damage. We used the fragility curves of different damage levels and the interstory drift ratios (calculated by the measured acceleration of each story using double integration and a filter) to gauge the potential damage levels. We concluded that the acceptable detection of damage for an entire building is possible. With improvements to the synchronization of the P-Alert sensors, we also anticipate a damage localization feature for the stories of a building. PMID:29734736

An analytical-numerical method for determining the mechanical response of a condenser microphone

PubMed Central

Homentcovschi, Dorel; Miles, Ronald N.

2011-01-01

The paper is based on determining the reaction pressure on the diaphragm of a condenser microphone by integrating numerically the frequency domain Stokes system describing the velocity and the pressure in the air domain beneath the diaphragm. Afterwards, the membrane displacement can be obtained analytically or numerically. The method is general and can be applied to any geometry of the backplate holes, slits, and backchamber. As examples, the method is applied to the Bruel & Kjaer (B&K) 4134 1/2-inch microphone determining the mechanical sensitivity and the mechano-thermal noise for a domain of frequencies and also the displacement field of the membrane for two specified frequencies. These elements compare well with the measured values published in the literature. Also a new design, completely micromachined (including the backvolume) of the B&K micro-electro-mechanical systems (MEM) 1/4-inch measurement microphone is proposed. It is shown that its mechanical performances are very similar to those of the B&K MEMS measurement microphone. PMID:22225026

An analytical-numerical method for determining the mechanical response of a condenser microphone.

PubMed

Homentcovschi, Dorel; Miles, Ronald N

2011-12-01

The paper is based on determining the reaction pressure on the diaphragm of a condenser microphone by integrating numerically the frequency domain Stokes system describing the velocity and the pressure in the air domain beneath the diaphragm. Afterwards, the membrane displacement can be obtained analytically or numerically. The method is general and can be applied to any geometry of the backplate holes, slits, and backchamber. As examples, the method is applied to the Bruel & Kjaer (B&K) 4134 1/2-inch microphone determining the mechanical sensitivity and the mechano-thermal noise for a domain of frequencies and also the displacement field of the membrane for two specified frequencies. These elements compare well with the measured values published in the literature. Also a new design, completely micromachined (including the backvolume) of the B&K micro-electro-mechanical systems (MEM) 1/4-inch measurement microphone is proposed. It is shown that its mechanical performances are very similar to those of the B&K MEMS measurement microphone. © 2011 Acoustical Society of America

Silicon Satellites: Picosats, Nanosats, and Microsats

NASA Technical Reports Server (NTRS)

Janson, Siegfried W.

1995-01-01

Silicon, the most abundant solid element in the Earth's lithosphere, is a useful material for spacecraft construction. Silicon is stronger than stainless steel, has a thermal conductivity about half that of aluminum, is transparent to much of the infrared radiation spectrum, and can form a stable oxide. These unique properties enable silicon to become most of the mass of a satellite, it can simultaneously function as structure, heat transfer system, radiation shield, optics, and semiconductor substrate. Semiconductor batch-fabrication techniques can produce low-power digital circuits, low-power analog circuits, silicon-based radio frequency circuits, and micro-electromechanical systems (MEMS) such as thrusters and acceleration sensors on silicon substrates. By exploiting these fabrication techniques, it is possible to produce highly-integrated satellites for a number of applications. This paper analyzes the limitations of silicon satellites due to size. Picosatellites (approximately 1 gram mass), nanosatellites (about 1 kg mass), and highly capable microsatellites (about 10 kg mass) can perform various missions with lifetimes of a few days to greater than a decade.

Evaluating Post-Earthquake Building Safety Using Economical MEMS Seismometers.

PubMed

Hsu, Ting-Yu; Yin, Ren-Cheng; Wu, Yih-Min

2018-05-05

The earthquake early warning (EEW)-research group at National Taiwan University has been developing a microelectromechanical system-based accelerometer called “P-Alert”, designed for issuing EEWs. The main advantage of P-Alert is that it is a relatively economical seismometer. However, because of the expensive nature of commercial hardware for structural health monitoring (SHM) systems, the application of SHM to buildings remains limited. To determine the performance of P-Alert for evaluating post-earthquake building safety, we conducted a series of steel-frame shaking table tests with incremental damage. We used the fragility curves of different damage levels and the interstory drift ratios (calculated by the measured acceleration of each story using double integration and a filter) to gauge the potential damage levels. We concluded that the acceptable detection of damage for an entire building is possible. With improvements to the synchronization of the P-Alert sensors, we also anticipate a damage localization feature for the stories of a building.

H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.

PubMed

Chen, Huipeng; Li, Mengyuan; Zhang, Yi; Xie, Huikai; Chen, Chang; Peng, Zhangming; Su, Shaohui

2018-02-08

Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm -1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems

PubMed Central

Li, Mengyuan; Zhang, Yi; Chen, Chang; Peng, Zhangming; Su, Shaohui

2018-01-01

Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm−1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions. PMID:29419765

X-ray pushing of a mechanical microswing.

PubMed

Siria, A; Rodrigues, M S; Dhez, O; Schwartz, W; Torricelli, G; Ledenmat, S; Rochat, N; Auvert, G; Bikondoa, O; Metzger, T H; Wermeille, D; Felici, R; Comin, F; Chevrier, J

2008-11-05

We report here for the first time the combination of x-ray synchrotron light and a micro-electro-mechanical system (MEMS). We show how it is possible to modulate in real time a MEMS mass distribution to induce a nanometric and tunable mechanical oscillation. The quantitative experimental demonstration we present here uses periodic thermal dilatation of a Ge microcrystal attached to a Si microlever, induced by controlled absorption of an intensity modulated x-ray microbeam. The mechanism proposed can be envisaged either for the detection of small heat flux or for the actuation of a mechanical system.

MEMS Louvers for Thermal Control

NASA Technical Reports Server (NTRS)

Champion, J. L.; Osiander, R.; Darrin, M. A. Garrison; Swanson, T. D.

1998-01-01

Mechanical louvers have frequently been used for spacecraft and instrument thermal control purposes. These devices typically consist of parallel or radial vanes, which can be opened or closed to vary the effective emissivity of the underlying surface. This project demonstrates the feasibility of using Micro-Electromechanical Systems (MEMS) technology to miniaturize louvers for such purposes. This concept offers the possibility of substituting the smaller, lighter weight, more rugged, and less costly MEMS devices for such mechanical louvers. In effect, a smart skin that self adjusts in response to environmental influences could be developed composed of arrays of thousands of miniaturized louvers. Several orders of magnitude size, weight, and volume decreases are potentially achieved using micro-electromechanical techniques. The use of this technology offers substantial benefits in spacecraft/instrument design, integration and testing, and flight operations. It will be particularly beneficial for the emerging smaller spacecraft and instruments of the future. In addition, this MEMS thermal louver technology can form the basis for related spacecraft instrument applications. The specific goal of this effort was to develop a preliminary MEMS device capable of modulating the effective emissivity of radiators on spacecraft. The concept pursued uses hinged panels, or louvers, in a manner such that heat emitted from the radiators is a function of louver angle. An electrostatic comb drive or other such actuator can control the louver position. The initial design calls for the louvers to be gold coated while the underlying surface is of high emissivity. Since, the base MEMS material, silicon, is transparent in the InfraRed (IR) spectrum, the device has a minimum emissivity when closed and a maximum emissivity when open. An initial set of polysilicon louver devices was designed at the Johns Hopkins Applied Physics Laboratory in conjunction with the Thermal Engineering Branch at NASA's Goddard Space Flight Center.

A MEMS Condenser Microphone-Based Intracochlear Acoustic Receiver.

PubMed

Pfiffner, Flurin; Prochazka, Lukas; Peus, Dominik; Dobrev, Ivo; Dalbert, Adrian; Sim, Jae Hoon; Kesterke, Rahel; Walraevens, Joris; Harris, Francesca; Roosli, Christof; Obrist, Dominik; Huber, Alexander

2017-10-01

Intracochlear sound pressure (ICSP) measurements are limited by the small dimensions of the human inner ear and the requirements imposed by the liquid medium. A robust intracochlear acoustic receiver (ICAR) for repeated use with a simple data acquisition system that provides the required high sensitivity and small dimensions does not yet exist. The work described in this report aims to fill this gap and presents a new microelectromechanical systems (MEMS) condenser microphone (CMIC)-based ICAR concept suitable for ICSP measurements in human temporal bones. The ICAR head consisted of a passive protective diaphragm (PD) sealing the MEMS CMIC against the liquid medium, enabling insertion into the inner ear. The components of the MEMS CMIC-based ICAR were expressed by a lumped element model (LEM) and compared to the performance of successfully fabricated ICARs. Good agreement was achieved between the LEM and the measurements with different sizes of the PD. The ICSP measurements in a human cadaver temporal bone yielded data in agreement with the literature. Our results confirm that the presented MEMS CMIC-based ICAR is a promising technology for measuring ICSP in human temporal bones in the audible frequency range. A sensor for evaluation of the biomechanical hearing process by quantification of ICSP is presented. The concept has potential as an acoustic receiver in totally implantable cochlear implants.

Joint Bearing and Range Estimation of Multiple Objects from Time-Frequency Analysis.

PubMed

Liu, Jeng-Cheng; Cheng, Yuang-Tung; Hung, Hsien-Sen

2018-01-19

Direction-of-arrival (DOA) and range estimation is an important issue of sonar signal processing. In this paper, a novel approach using Hilbert-Huang transform (HHT) is proposed for joint bearing and range estimation of multiple targets based on a uniform linear array (ULA) of hydrophones. The structure of this ULA based on micro-electro-mechanical systems (MEMS) technology, and thus has attractive features of small size, high sensitivity and low cost, and is suitable for Autonomous Underwater Vehicle (AUV) operations. This proposed target localization method has the following advantages: only a single snapshot of data is needed and real-time processing is feasible. The proposed algorithm transforms a very complicated nonlinear estimation problem to a simple nearly linear one via time-frequency distribution (TFD) theory and is verified with HHT. Theoretical discussions of resolution issue are also provided to facilitate the design of a MEMS sensor with high sensitivity. Simulation results are shown to verify the effectiveness of the proposed method.

Hybrid integration of III-V semiconductor lasers on silicon waveguides using optofluidic microbubble manipulation

PubMed Central

Jung, Youngho; Shim, Jaeho; Kwon, Kyungmook; You, Jong-Bum; Choi, Kyunghan; Yu, Kyoungsik

2016-01-01

Optofluidic manipulation mechanisms have been successfully applied to micro/nano-scale assembly and handling applications in biophysics, electronics, and photonics. Here, we extend the laser-based optofluidic microbubble manipulation technique to achieve hybrid integration of compound semiconductor microdisk lasers on the silicon photonic circuit platform. The microscale compound semiconductor block trapped on the microbubble surface can be precisely assembled on a desired position using photothermocapillary convective flows induced by focused laser beam illumination. Strong light absorption within the micro-scale compound semiconductor object allows real-time and on-demand microbubble generation. After the assembly process, we verify that electromagnetic radiation from the optically-pumped InGaAsP microdisk laser can be efficiently coupled to the single-mode silicon waveguide through vertical evanescent coupling. Our simple and accurate microbubble-based manipulation technique may provide a new pathway for realizing high precision fluidic assembly schemes for heterogeneously integrated photonic/electronic platforms as well as microelectromechanical systems. PMID:27431769

Fabrication of a Polymer Micro Needle Array by Mask-Dragging X-Ray Lithography and Alignment X-Ray Lithography

NASA Astrophysics Data System (ADS)

Li, Yi-Gui; Yang, Chun-Sheng; Liu, Jing-Quan; Sugiyama, Susumu

2011-03-01

Polymer materials such as transparent thermoplastic poly(methyl methacrylate) (PMMA) have been of great interest in the research and development of integrated circuits and micro-electromechanical systems due to their relatively low cost and easy process. We fabricated PMMA-based polymer hollow microneedle arrays by mask-dragging and aligning x-ray lithography. Techniques for 3D micromachining by direct lithography using x-rays are developed. These techniques are based on using image projection in which the x-ray is used to illuminate an appropriate gold pattern on a polyimide film mask. The mask is imaged onto the PMMA sample. A pattern with an area of up to 100 × 100mm2 can be fabricated with sub-micron resolution and a highly accurate order of a few microns by using a dragging mask. The fabrication technology has several advantages, such as forming complex 3D micro structures, high throughput and low cost.

Wavelength-tunable entangled photons from silicon-integrated III-V quantum dots.

PubMed

Chen, Yan; Zhang, Jiaxiang; Zopf, Michael; Jung, Kyubong; Zhang, Yang; Keil, Robert; Ding, Fei; Schmidt, Oliver G

2016-01-27

Many of the quantum information applications rely on indistinguishable sources of polarization-entangled photons. Semiconductor quantum dots are among the leading candidates for a deterministic entangled photon source; however, due to their random growth nature, it is impossible to find different quantum dots emitting entangled photons with identical wavelengths. The wavelength tunability has therefore become a fundamental requirement for a number of envisioned applications, for example, nesting different dots via the entanglement swapping and interfacing dots with cavities/atoms. Here we report the generation of wavelength-tunable entangled photons from on-chip integrated InAs/GaAs quantum dots. With a novel anisotropic strain engineering technique based on PMN-PT/silicon micro-electromechanical system, we can recover the quantum dot electronic symmetry at different exciton emission wavelengths. Together with a footprint of several hundred microns, our device facilitates the scalable integration of indistinguishable entangled photon sources on-chip, and therefore removes a major stumbling block to the quantum-dot-based solid-state quantum information platforms.

Scheduling in Sensor Grid Middleware for Telemedicine Using ABC Algorithm

PubMed Central

Vigneswari, T.; Mohamed, M. A. Maluk

2014-01-01

Advances in microelectromechanical systems (MEMS) and nanotechnology have enabled design of low power wireless sensor nodes capable of sensing different vital signs in our body. These nodes can communicate with each other to aggregate data and transmit vital parameters to a base station (BS). The data collected in the base station can be used to monitor health in real time. The patient wearing sensors may be mobile leading to aggregation of data from different BS for processing. Processing real time data is compute-intensive and telemedicine facilities may not have appropriate hardware to process the real time data effectively. To overcome this, sensor grid has been proposed in literature wherein sensor data is integrated to the grid for processing. This work proposes a scheduling algorithm to efficiently process telemedicine data in the grid. The proposed algorithm uses the popular swarm intelligence algorithm for scheduling to overcome the NP complete problem of grid scheduling. Results compared with other heuristic scheduling algorithms show the effectiveness of the proposed algorithm. PMID:25548557

Miniature atomic scalar magnetometer for space based on the rubidium isotope 87Rb.

PubMed

Korth, Haje; Strohbehn, Kim; Tejada, Francisco; Andreou, Andreas G; Kitching, John; Knappe, Svenja; Lehtonen, S John; London, Shaughn M; Kafel, Matiwos

2016-08-01

A miniature atomic scalar magnetometer based on the rubidium isotope 87 Rb was developed for operation in space. The instrument design implements both M x and M z mode operation and leverages a novel microelectromechanical system (MEMS) fabricated vapor cell and a custom silicon-on-sapphire (SOS) complementary metal-oxide-semiconductor (CMOS) integrated circuit. The vapor cell has a volume of only 1 mm 3 so that it can be efficiently heated to its operating temperature by a specially designed, low-magnetic-field-generating resistive heater implemented in multiple metal layers of the transparent sapphire substrate of the SOS-CMOS chips. The SOS-CMOS chip also hosts the Helmholtz coil and associated circuitry to stimulate the magnetically sensitive atomic resonance and temperature sensors. The prototype instrument has a total mass of fewer than 500 g and uses less than 1 W of power, while maintaining a sensitivity of 15 pT/√Hz at 1 Hz, comparable to present state-of-the-art absolute magnetometers.

Review article: Fabrication of nanofluidic devices

PubMed Central

Duan, Chuanhua; Wang, Wei; Xie, Quan

2013-01-01

Thanks to its unique features at the nanoscale, nanofluidics, the study and application of fluid flow in nanochannels/nanopores with at least one characteristic size smaller than 100 nm, has enabled the occurrence of many interesting transport phenomena and has shown great potential in both bio- and energy-related fields. The unprecedented growth of this research field is apparently attributed to the rapid development of micro/nanofabrication techniques. In this review, we summarize recent activities and achievements of nanofabrication for nanofluidic devices, especially those reported in the past four years. Three major nanofabrication strategies, including nanolithography, microelectromechanical system based techniques, and methods using various nanomaterials, are introduced with specific fabrication approaches. Other unconventional fabrication attempts which utilize special polymer properties, various microfabrication failure mechanisms, and macro/microscale machining techniques are also presented. Based on these fabrication techniques, an inclusive guideline for materials and processes selection in the preparation of nanofluidic devices is provided. Finally, technical challenges along with possible opportunities in the present nanofabrication for nanofluidic study are discussed. PMID:23573176

Micromirror-based manipulation of synchrotron x-ray beams

NASA Astrophysics Data System (ADS)

Walko, D. A.; Chen, Pice; Jung, I. W.; Lopez, D.; Schwartz, C. P.; Shenoy, G. K.; Wang, Jin

2017-08-01

Synchrotron beamlines typically use macroscopic, quasi-static optics to manipulate x-ray beams. We present the use of dynamic microelectromechanical systems-based optics (MEMS) to temporally modulate synchrotron x-ray beams. We demonstrate this concept using single-crystal torsional MEMS micromirrors oscillating at frequencies of 75 kHz. Such a MEMS micromirror, with lateral dimensions of a few hundred micrometers, can interact with x rays by operating in grazing-incidence reflection geometry; x rays are deflected only when an x-ray pulse is incident on the rotating micromirror under appropriate conditions, i.e., at an angle less than the critical angle for reflectivity. The time window for such deflections depends on the frequency and amplitude of the MEMS rotation. We demonstrate that reflection geometry can produce a time window of a few microseconds. We further demonstrate that MEMS optics can isolate x rays from a selected synchrotron bunch or group of bunches. With ray-trace simulations we explain the currently achievable time windows and suggest a path toward improvements.

Integrated wide-angle scanner based on translating a curved mirror of acylindrical shape.

PubMed

Sabry, Yasser M; Khalil, Diaa; Saadany, Bassam; Bourouina, Tarik

2013-06-17

A wide angle microscanning architecture is presented in which the angular deflection is achieved by displacing the principle axis of a curved silicon micromirror of acylindrical shape, with respect to the incident beam optical axis. The micromirror curvature is designed to overcome the possible deformation of the scanned beam spot size during scanning. In the presented architecture, the optical axis of the beam lays in-plane with respect to the substrate opening the door for a completely integrated and self-aligned miniaturized scanner. A micro-optical bench scanning device, based on translating a 200 μm focal length micromirror by an electrostatic comb-drive actuator, is implemented on a silicon chip. The microelectromechanical system has a resonance frequency of 329 Hz and a quality factor of 22. A single-mode optical fiber is used as the optical source and inserted into a micromachined groove fabricated and lithographically aligned with the microbench. Optical deflection angles up to 110 degrees are demonstrated.

MEMS Deformable Mirror Technology Development for Space-Based Exoplanet Detection

NASA Astrophysics Data System (ADS)

Bierden, Paul; Cornelissen, S.; Ryan, P.

2014-01-01

In the search for earth-like extrasolar planets that has become an important objective for NASA, a critical technology development requirement is to advance deformable mirror (DM) technology. High-actuator-count DMs are critical components for nearly all proposed coronagraph instrument concepts. The science case for exoplanet imaging is strong, and rapid recent advances in test beds with DMs made using microelectromechanical system (MEMS) technology have motivated a number of compelling mission concepts that set technical specifications for their use as wavefront controllers. This research will advance the technology readiness of the MEMS DMs components that are currently at the forefront of the field, and the project will be led by the manufacturer of those components, Boston Micromachines Corporation (BMC). The project aims to demonstrate basic functionality and performance of this key component in critical test environments and in simulated operational environments, while establishing model-based predictions of its performance relative to launch and space environments. Presented will be the current status of the project with modeling and initial test results.

Wavelength specific excitation of gold nanoparticle thin-films

NASA Astrophysics Data System (ADS)

Lucas, Thomas M.; James, Kurtis T.; Beharic, Jasmin; Moiseeva, Evgeniya V.; Keynton, Robert S.; O'Toole, Martin G.; Harnett, Cindy K.

2014-01-01

Advances in microelectromechanical systems (MEMS) continue to empower researchers with the ability to sense and actuate at the micro scale. Thermally driven MEMS components are often used for their rapid response and ability to apply relatively high forces. However, thermally driven MEMS often have high power consumption and require physical wiring to the device. This work demonstrates a basis for designing light-powered MEMS with a wavelength specific response. This is accomplished by patterning surface regions with a thin film containing gold nanoparticles that are tuned to have an absorption peak at a particular wavelength. The heating behavior of these patterned surfaces is selected by the wavelength of laser directed at the sample. This method also eliminates the need for wires to power a device. The results demonstrate that gold nanoparticle films are effective wavelength-selective absorbers. This "hybrid" of infrared absorbent gold nanoparticles and MEMS fabrication technology has potential applications in light-actuated switches and other mechanical structures that must bend at specific regions. Deposition methods and surface chemistry will be integrated with three-dimensional MEMS structures in the next phase of this work. The long-term goal of this project is a system of light-powered microactuators for exploring cellular responses to mechanical stimuli, increasing our fundamental understanding of tissue response to everyday mechanical stresses at the molecular level.

Microelectromechanical ratcheting apparatus

DOEpatents

Barnes, Stephen M.; Miller, Samuel L.; Jensen, Brian D.; Rodgers, M. Steven; Burg, Michael S.

2001-01-01

A microelectromechanical (MEM) ratcheting apparatus is disclosed which includes an electrostatic or thermal actuator that drives a moveable member in the form of a ring gear, stage, or rack. Motion is effected by one or more reciprocating pawls driven by the actuator in a direction that is parallel to, in line with, or tangential to the path. The reciprocating pawls engage indexing elements (e.g. teeth or pins) on the moveable member to incrementally move the member along a curved or straight path with the ability to precisely control and determine the position of the moveable member. The MEM apparatus can be formed on a silicon substrate by conventional surface micromachining methods.

Wafer-to-wafer bonding of nonplanarized MEMS surfaces using solder

NASA Astrophysics Data System (ADS)

Sparks, D.; Queen, G.; Weston, R.; Woodward, G.; Putty, M.; Jordan, L.; Zarabadi, S.; Jayakar, K.

2001-11-01

The fabrication and reliability of a solder wafer-to-wafer bonding process is discussed. Using a solder reflow process allows vacuum packaging to be accomplished with unplanarized complementary metal-oxide semiconductor (CMOS) surface topography. This capability enables standard CMOS processes, and integrated microelectromechanical systems devices to be packaged at the chip-level. Alloy variations give this process the ability to bond at lower temperatures than most alternatives. Factors affecting hermeticity, shorts, Q values, shifting cavity pressure, wafer saw cleanliness and corrosion resistance will be covered.

A Novel Vacuum Packaging Design Process for Microelectromechanical System (MEMS) Quad-Mass Gyroscopes

DTIC Science & Technology

2016-09-01

16 2.2.1 Bake Out 18 2.2.2 Ramp-Up 19 2.2.3 Lid Seal 20 2.2.4 Cool/Purge 22 2.3 Residual Gas Analyzer Experiment 23 3. Results 28 4...Fig. 24 RGA experiment setup .........................................................................24 Fig. 25 RGA output for a 1-h bake out at T...225 °C ......................................25 Fig. 26 RGA output of a 2-h sample for an 8-h bake out .................................26 Fig. 27