Microlens frames for laser diode arrays

DOEpatents

Skidmore, J.A.; Freitas, B.L.

1999-07-13

Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter. 12 figs.

Microlens frames for laser diode arrays

DOEpatents

Skidmore, Jay A.; Freitas, Barry L.

1999-01-01

Monolithic microlens frames enable the fabrication of monolithic laser diode arrays and are manufactured inexpensively with high registration, and with inherent focal length compensation for any lens diameter variation. A monolithic substrate is used to fabricate a low-cost microlens array. The substrate is wet-etched or sawed with a series of v-grooves. The v-grooves can be created by wet-etching, by exploiting the large etch-rate selectivity of different crystal planes. The v-grooves provide a support frame for either cylindrical or custom-shaped microlenses. Because the microlens frames are formed by photolithographic semiconductor batch-processing techniques, they can be formed inexpensively over large areas with precise lateral and vertical registration. The v-groove has an important advantage for preserving the correct focus for lenses of varying diameter.

Simple fabrication of closed-packed IR microlens arrays on silicon by femtosecond laser wet etching

NASA Astrophysics Data System (ADS)

Meng, Xiangwei; Chen, Feng; Yang, Qing; Bian, Hao; Du, Guangqing; Hou, Xun

2015-10-01

We demonstrate a simple route to fabricate closed-packed infrared (IR) silicon microlens arrays (MLAs) based on femtosecond laser irradiation assisted by wet etching method. The fabricated MLAs show high fill factor, smooth surface and good uniformity. They can be used as optical devices for IR applications. The exposure and etching parameters are optimized to obtain reproducible microlens with hexagonal and rectangular arrangements. The surface roughness of the concave MLAs is only 56 nm. This presented method is a maskless process and can flexibly change the size, shape and the fill factor of the MLAs by controlling the experimental parameters. The concave MLAs on silicon can work in IR region and can be used for IR sensors and imaging applications.

Electromagnetic microforging apparatus for low-cost fabrication of molds for microlens arrays

NASA Astrophysics Data System (ADS)

Pribošek, Jaka; Diaci, Janez

2015-06-01

This study addresses the problem of low-cost microlens fabrication and outlines the development of a novel microforging apparatus for microlens mold fabrication. The apparatus consists of an electromagnetic impact tool which strikes a piston with a hardened steel ball into a workpiece. The impact creates a spherical indentation which serves as a lens cavity. The microforging apparatus is controlled by a microprocessor control unit communicating with a personal computer and enables on-the-fly variation of electromagnetic excitation to control the microforging process. We studied the effects of process parameters on the diameter of the fabricated lens cavities inspected by a custom automatic image processing algorithm. Different microforging regimes are analyzed and discussed. The surface quality of fabricated cavities has been inspected by confocal microscopy and the influence of fill factor on sphericity error has been studied. The proposed microforging method enables the fabrication of molds with 100% fill factor, surface roughness as low as Ra 0.15 µm and sphericity error lower than 0.5 µm. The fabricated microlens arrays exhibit nearly diffraction-limited performance, offering a wide range of possible applications. We believe this study provides access to microoptical technology for smaller optical and computer vision laboratories.

Microoptical artificial compound eyes: from design to experimental verification of two different concepts

NASA Astrophysics Data System (ADS)

Duparré, Jacques; Wippermann, Frank; Dannberg, Peter; Schreiber, Peter; Bräuer, Andreas; Völkel, Reinhard; Scharf, Toralf

2005-09-01

Two novel objective types on the basis of artificial compound eyes are examined. Both imaging systems are well suited for fabrication using microoptics technology due to the small required lens sags. In the apposition optics a microlens array (MLA) and a photo detector array of different pitch in its focal plane are applied. The image reconstruction is based on moire magnification. Several generations of demonstrators of this objective type are manufactured by photo lithographic processes. This includes a system with opaque walls between adjacent channels and an objective which is directly applied onto a CMOS detector array. The cluster eye approach, which is based on a mixture of superposition compound eyes and the vision system of jumping spiders, produces a regular image. Here, three microlens arrays of different pitch form arrays of Keplerian microtelescopes with tilted optical axes, including a field lens. The microlens arrays of this demonstrator are also fabricated using microoptics technology, aperture arrays are applied. Subsequently the lens arrays are stacked to the overall microoptical system on wafer scale. Both fabricated types of artificial compound eye imaging systems are experimentally characterized with respect to resolution, sensitivity and cross talk between adjacent channels. Captured images are presented.

Electrowetting of liquid polymer on petal-mimetic microbowl-array surfaces for formation of microlens array with varying focus on a single substrate

NASA Astrophysics Data System (ADS)

Li, Xiangmeng; Shao, Jinyou; Li, Xiangming; Tian, Hongmiao

2015-03-01

In this paper, microlens array with varying focal lengths were fabricated on a single microbowl-array textured substrate. The solid microbowl-arrayed NOA61 (kind of polyurethane-based polymer with UV curablity) surface was resulted from nanoimprinting by polydimethylsiloxane (PDMS) mold. The PDMS mold was replicated from an SU-8 master which was generated by electron beam lithography. Such microbowl-arrayed surfaces demonstrate petal-mimetic highly adhesive hydrophobic wetting properties, which can promote an irreversible electrowetting (EW) effect and a dereased contact angle of water droplets as well as other liquid droplets by applying direct current (DC) voltage. To fabricate a microlens array with varying focal-lengths, liquid NOA61 was supplied from a syringe on the solid NOA61 microtextured film and DC voltage was applied succesively. After removing the DC voltage, these liquid NOA61 microdrops deposited on the solid microtextured NOA61 surface on tin-indium-oxide coated substrate could be solidified via UV irradiation, thus leading to microlens array with uneven numerical apertures on a single substrate. Numerical simulation was also done to verify the EW effect. Finally, optical imaging characterization was performed to confirm the varied focus of the NOA61 microdrops.

Real-time gray-scale photolithography for fabrication of continuous microstructure

NASA Astrophysics Data System (ADS)

Peng, Qinjun; Guo, Yongkang; Liu, Shijie; Cui, Zheng

2002-10-01

A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained.

Development of adaptive liquid microlenses and microlens arrays

NASA Astrophysics Data System (ADS)

Berry, Shaun R.; Stewart, Jason B.; Thorsen, Todd A.; Guha, Ingrid

2013-03-01

We report on the development of sub-millimeter size adaptive liquid microlenses and microlens arrays using two immiscible liquids to form individual lenses. Microlenses and microlens arrays having aperture diameters as small as 50 microns were fabricated on a planar quartz substrate using patterned hydrophobic/hydrophilic regions. Liquid lenses were formed by a self-assembled oil dosing process that created well-defined lenses having a high fill factor. Variable focus was achieved by controlling the lens curvature through electrowetting. Greater than 70° of contact angle change was achieved with less than 20 volts, which results in a large optical power dynamic range.

Ruggedized microchannel-cooled laser diode array with self-aligned microlens

DOEpatents

Freitas, Barry L.; Skidmore, Jay A.

2003-11-11

A microchannel-cooled, optically corrected, laser diode array is fabricated by mounting laser diode bars onto Si surfaces. This approach allows for the highest thermal impedance, in a ruggedized, low-cost assembly that includes passive microlens attachment without the need for lens frames. The microlensed laser diode array is usable in all solid-state laser systems that require efficient, directional, narrow bandwidth, high optical power density pump sources.

A liquid crystal microlens array with aluminum and graphene electrodes for plenoptic imaging

NASA Astrophysics Data System (ADS)

Lei, Yu; Tong, Qing; Luo, Jun; Zhang, Xinyu; Sang, Hongshi; Xie, Changsheng

2015-12-01

Currently, several semiconducting oxide materials such as typical indium tin oxide are widely used as the transparent conducting electrodes (TCEs) in liquid crystal microlens arrays. In this paper, we fabricate a liquid crystal microlens array using graphene rather than semiconducting oxides as the TCE. Common optical experiments are carried out to acquire the focusing features of the graphene-based liquid crystal microlens array (GLCMLA) driven electrically. The acquired optical fields show that the GLCMLA can converge incident collimating lights efficiently. The relationship between the focal length and the applied voltage signal is presented. Then the GLCMLA is deployed in a plenoptic camera prototype and the raw images are acquired so as to verify their imaging capability. Our experiments demonstrate that graphene has already presented a broad application prospect in the area of adaptive optics.

Quantitative Phase Microscopy for Accurate Characterization of Microlens Arrays

NASA Astrophysics Data System (ADS)

Grilli, Simonetta; Miccio, Lisa; Merola, Francesco; Finizio, Andrea; Paturzo, Melania; Coppola, Sara; Vespini, Veronica; Ferraro, Pietro

Microlens arrays are of fundamental importance in a wide variety of applications in optics and photonics. This chapter deals with an accurate digital holography-based characterization of both liquid and polymeric microlenses fabricated by an innovative pyro-electrowetting process. The actuation of liquid and polymeric films is obtained through the use of pyroelectric charges generated into polar dielectric lithium niobate crystals.

Fabrication of microlens array and bifocal microlens using the methods of laser ablation and solvent reflow

NASA Astrophysics Data System (ADS)

Yu, Cheng-Chian; Ho, Jeng-Rong

2015-12-01

Based on the techniques of laser microdrilling and solvent reflow, this study reports on a straightforward approach for fabricating plastic microlens arrays (MLAs). First, we use the ArF excimer laser to drill microholes on a polymethylmethacrylate plate for defining the lens number, initial depth, and diameter. The propylene glycol monomethyl ether acetate solvent is then employed to regulate the surface profile that leads to a resulting negative (concave) MLA. The corresponding positive (convex), polydimethyl-siloxane MLA is obtained by the soft-replica-molding technique. Through varying the pattern size and period on the mask and the light intensity for laser drilling and regulating the solvent in the reflow process, we exhibit the feasibility of making MLAs with various sizes and shapes. By modifying the laser ablation step to drill two microholes with different diameters and depths at two levels, we fabricate a bifocal microlens. The obtained microlenses have excellent surface and optical properties: surface roughness down to several nanometers and focal lengths varying from hundreds to thousands of micrometers. This approach is flexible for constructing microlenses with various sizes and shapes and can fabricate MLAs with a high fill factor.

A novel lab-on-chip platform with integrated solid phase PCR and Supercritical Angle Fluorescence (SAF) microlens array for highly sensitive and multiplexed pathogen detection.

PubMed

Hung, Tran Quang; Chin, Wai Hoe; Sun, Yi; Wolff, Anders; Bang, Dang Duong

2017-04-15

Solid-phase PCR (SP-PCR) has become increasingly popular for molecular diagnosis and there have been a few attempts to incorporate SP-PCR into lab-on-a-chip (LOC) devices. However, their applicability for on-line diagnosis is hindered by the lack of sensitive and portable on-chip optical detection technology. In this paper, we addressed this challenge by combining the SP-PCR with super critical angle fluorescence (SAF) microlens array embedded in a microchip. We fabricated miniaturized SAF microlens array as part of a microfluidic chamber in thermoplastic material and performed multiplexed SP-PCR directly on top of the SAF microlens array. Attribute to the high fluorescence collection efficiency of the SAF microlens array, the SP-PCR assay on the LOC platform demonstrated a high sensitivity of 1.6 copies/µL, comparable to off-chip detection using conventional laser scanner. The combination of SP-PCR and SAF microlens array allows for on-chip highly sensitive and multiplexed pathogen detection with low-cost and compact optical components. The LOC platform would be widely used as a high-throughput biosensor to analyze food, clinical and environmental samples. Copyright © 2016 Elsevier B.V. All rights reserved.

An electrically tunable plenoptic camera using a liquid crystal microlens array.

PubMed

Lei, Yu; Tong, Qing; Zhang, Xinyu; Sang, Hongshi; Ji, An; Xie, Changsheng

2015-05-01

Plenoptic cameras generally employ a microlens array positioned between the main lens and the image sensor to capture the three-dimensional target radiation in the visible range. Because the focal length of common refractive or diffractive microlenses is fixed, the depth of field (DOF) is limited so as to restrict their imaging capability. In this paper, we propose a new plenoptic camera using a liquid crystal microlens array (LCMLA) with electrically tunable focal length. The developed LCMLA is fabricated by traditional photolithography and standard microelectronic techniques, and then, its focusing performance is experimentally presented. The fabricated LCMLA is directly integrated with an image sensor to construct a prototyped LCMLA-based plenoptic camera for acquiring raw radiation of targets. Our experiments demonstrate that the focused region of the LCMLA-based plenoptic camera can be shifted efficiently through electrically tuning the LCMLA used, which is equivalent to the extension of the DOF.

An electrically tunable plenoptic camera using a liquid crystal microlens array

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lei, Yu; School of Automation, Huazhong University of Science and Technology, Wuhan 430074; Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074

2015-05-15

Plenoptic cameras generally employ a microlens array positioned between the main lens and the image sensor to capture the three-dimensional target radiation in the visible range. Because the focal length of common refractive or diffractive microlenses is fixed, the depth of field (DOF) is limited so as to restrict their imaging capability. In this paper, we propose a new plenoptic camera using a liquid crystal microlens array (LCMLA) with electrically tunable focal length. The developed LCMLA is fabricated by traditional photolithography and standard microelectronic techniques, and then, its focusing performance is experimentally presented. The fabricated LCMLA is directly integrated withmore » an image sensor to construct a prototyped LCMLA-based plenoptic camera for acquiring raw radiation of targets. Our experiments demonstrate that the focused region of the LCMLA-based plenoptic camera can be shifted efficiently through electrically tuning the LCMLA used, which is equivalent to the extension of the DOF.« less

An electrically tunable plenoptic camera using a liquid crystal microlens array

NASA Astrophysics Data System (ADS)

Lei, Yu; Tong, Qing; Zhang, Xinyu; Sang, Hongshi; Ji, An; Xie, Changsheng

2015-05-01

Plenoptic cameras generally employ a microlens array positioned between the main lens and the image sensor to capture the three-dimensional target radiation in the visible range. Because the focal length of common refractive or diffractive microlenses is fixed, the depth of field (DOF) is limited so as to restrict their imaging capability. In this paper, we propose a new plenoptic camera using a liquid crystal microlens array (LCMLA) with electrically tunable focal length. The developed LCMLA is fabricated by traditional photolithography and standard microelectronic techniques, and then, its focusing performance is experimentally presented. The fabricated LCMLA is directly integrated with an image sensor to construct a prototyped LCMLA-based plenoptic camera for acquiring raw radiation of targets. Our experiments demonstrate that the focused region of the LCMLA-based plenoptic camera can be shifted efficiently through electrically tuning the LCMLA used, which is equivalent to the extension of the DOF.

Rapid laser fabrication of microlens array using colorless liquid photopolymer for AMOLED devices

NASA Astrophysics Data System (ADS)

Kim, Kwang-Ryul; Jeong, Han-Wook; Lee, Kong-Soo; Yi, Junsin; Yoo, Jae-Chern; Cho, Myung-Woo; Cho, Sung-Hak; Choi, Byoungdeog

2011-01-01

Microlens array (MLA) is microfabricated using Ultra Violet (UV) laser for display device applications. A colorless liquid photopolymer, Norland Optical Adhesive (NOA) 60, is spin-coated and pre-cured via UV light for completing the laser process. The laser energy controlled by a galvano scanner is radiated on the surface of the NOA 60. A rapid thermal volume expansion inside the material creates microlens array when the Gaussian laser energy is absorbed. The fabrication process conditions for various shapes and densities of MLA using a non-contact surface profiler are investigated. Furthermore, we analyze the optical and display characteristics for the Organic Light Emitting Diode (OLED) devices. Optimized condition furnishes the OLED with the enhancement of light emission by 15%. We show that UV laser technique, which is installed with NOA 60 MLA layer, is eligible for improving the performance of the next generation display devices.

Fly's eye condenser based on chirped microlens arrays

NASA Astrophysics Data System (ADS)

Wippermann, Frank C.; Zeitner, Uwe-D.; Dannberg, Peter; Bräuer, Andreas; Sinzinger, Stefan

2007-09-01

Lens array arrangements are commonly used for the beam shaping of almost arbitrary input intensity distributions into a top-hat. The setup usually consists of a Fourier lens and two identical regular microlens arrays - often referred to as tandem lens array - where the second one is placed in the focal plane of the first microlenses. Due to the periodic structure of regular arrays the output intensity distribution is modulated by equidistant sharp intensity peaks which are disturbing the homogeneity. The equidistantly located intensity peaks can be suppressed when using a chirped and therefore non-periodic microlens array. A far field speckle pattern with more densely and irregularly located intensity peaks results leading to an improved homogeneity of the intensity distribution. In contrast to stochastic arrays, chirped arrays consist of individually shaped lenses defined by a parametric description of the cells optical function which can be derived completely from analytical functions. This gives the opportunity to build up tandem array setups enabling to achieve far field intensity distribution with an envelope of a top-hat. We propose a new concept for fly's eye condensers incorporating a chirped tandem microlens array for the generation of a top-hat far field intensity distribution with improved homogenization under coherent illumination. The setup is compliant to reflow of photoresist as fabrication technique since plane substrates accommodating the arrays are used. Considerations for the design of the chirped microlens arrays, design rules, wave optical simulations and measurements of the far field intensity distributions are presented.

Cylindrical microlens with an internally reflecting surface and a method of fabrication

DOEpatents

Beach, Raymond J.; Freitas, Barry L.

2004-03-23

A fast (high numerical aperture) cylindrical microlens, which includes an internally reflective surface, that functions to deviate the direction of the light that enters the lens from its original propagation direction is employed in optically conditioning laser diodes, laser diode arrays and laser diode bars.

A Cylindrical Microlens With An Internally Reflective Surface And A Method Of Fabrication

DOEpatents

Beach, Raymond J.; Freitas, Barry L.

2005-09-27

A fast (high numerical aperture) cylindrical microlens, which includes an internally reflective surface, that functions to deviate the direction of the light that enters the lens from its original propagation direction is employed in optically conditioning laser diodes, laser diode arrays and laser diode bars.

The fabrication of a multi-spectral lens array and its application in assisting color blindness

NASA Astrophysics Data System (ADS)

Di, Si; Jin, Jian; Tang, Guanrong; Chen, Xianshuai; Du, Ruxu

2016-01-01

This article presents a compact multi-spectral lens array and describes its application in assisting color-blindness. The lens array consists of 9 microlens, and each microlens is coated with a different color filter. Thus, it can capture different light bands, including red, orange, yellow, green, cyan, blue, violet, near-infrared, and the entire visible band. First, the fabrication process is described in detail. Second, an imaging system is setup and a color blindness testing card is selected as the sample. By the system, the vision results of normal people and color blindness can be captured simultaneously. Based on the imaging results, it is possible to be used for helping color-blindness to recover normal vision.

Development of a continuous roll-to-roll processing system for mass production of plastic optical film

NASA Astrophysics Data System (ADS)

Chang, Chih-Yuan; Tsai, Meng-Hsun

2015-12-01

This paper reports a highly effective method for the mass production of large-area plastic optical films with a microlens array pattern based on a continuous roll-to-roll film extrusion and roller embossing process. In this study, a thin steel mold with a micro-circular hole array pattern is fabricated by photolithography and a wet chemical etching process. The thin steel mold was then wrapped onto a metal cylinder to form an embossing roller mold. During the roll-to-roll process operation, a thermoplastic raw material (polycarbonate grains) was put into the barrel of the plastic extruder with a flat T-die. Then, the molten polymer film was extruded and immediately pressed against the surface of the embossing roller mold. Under the proper processing conditions, the molten polymer will just partially fill the micro-circular holes of the mold and due to surface tension form a convex lens surface. A continuous plastic optical film with a microlens array pattern was obtained. Experiments are carried out to investigate the effect of plastic microlens formation on the roll-to-roll process. Finally, the geometrical and optical properties of the fabricated plastic optical film were measured and proved satisfactory. This technique shows great potential for the mass production of large-area plastic optical films with a microlens array pattern.

Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser

NASA Astrophysics Data System (ADS)

Luo, Zhi; Yin, Kai; Dong, Xinran; Duan, Ji'an

2018-04-01

A simple and efficient technique for fabricating parabolic cylindrical microlens arrays (CMLAs) on the surface of fused silica by shaped femtosecond (fs) laser direct-writing is demonstrated. By means of spatially shaping of a Gaussian fs laser beam to a Bessel distribution, an inversed cylindrical shape laser intensity profile is formed in a specific cross-sectional plane among the shaped optical field. Applying it to experiments, large area close-packed parabolic CMLAs with line-width of 37.5 μm and array size of about 5 × 5 mm are produced. The cross-sectional outline of obtained lenslets has a satisfied parabolic profile and the numerical aperture (NA) of lenslets is more than 0.35. Furthermore, the focusing performance of the fabricated CMLA is also tested in this work and it has been demonstrated that the focusing power of the CMLA with a parabolic profile is better than that with a semi-circular one.

Integrated Arrays on Silicon at Terahertz Frequencies

NASA Technical Reports Server (NTRS)

Chattopadhayay, Goutam; Lee, Choonsup; Jung, Cecil; Lin, Robert; Peralta, Alessandro; Mehdi, Imran; Llombert, Nuria; Thomas, Bertrand

2011-01-01

In this paper we explore various receiver font-end and antenna architecture for use in integrated arrays at terahertz frequencies. Development of wafer-level integrated terahertz receiver front-end by using advanced semiconductor fabrication technologies and use of novel integrated antennas with silicon micromachining are reported. We report novel stacking of micromachined silicon wafers which allows for the 3-dimensional integration of various terahertz receiver components in extremely small packages which easily leads to the development of 2- dimensioanl multi-pixel receiver front-ends in the terahertz frequency range. We also report an integrated micro-lens antenna that goes with the silicon micro-machined front-end. The micro-lens antenna is fed by a waveguide that excites a silicon lens antenna through a leaky-wave or electromagnetic band gap (EBG) resonant cavity. We utilized advanced semiconductor nanofabrication techniques to design, fabricate, and demonstrate a super-compact, low-mass submillimeter-wave heterodyne frontend. When the micro-lens antenna is integrated with the receiver front-end we will be able to assemble integrated heterodyne array receivers for various applications such as multi-pixel high resolution spectrometer and imaging radar at terahertz frequencies.

Fabrication and Theoretical Evaluation of Microlens Arrays on Layered Polymers

NASA Astrophysics Data System (ADS)

Oder, Tom; McMaster, Michael; Merlo, Corey; Bagheri, Camron; Reakes, Clayton; Petrus, Joshua; Li, Dingqiang; Crescimanno, Michael; Andrews, James

2014-03-01

Arrays of microlens were fabricated on nano-layered polymers using reactive ion etching. Semi hemispherical patterns with diameters ranging from 20 to 80 micrometers were first formed on a thick photoresist film that was spin-coated on the layered polymers using standard photolithographic process employing a gray scale glass mask. These patterns were then transferred to the polymers using dry etching in a reactive ion etching system. The optimized etch condition included a mixture of sulfur hexafluoride and oxygen, which resulted in an etch depth of 5 micrometers and successfully exposed the individual sub-micron thick layers in the polymers. Physical characterization of the microlens arrays was done using atomic force microscope and scanning electron microscope. We combine basic physical optics theory with the transfer matrix analysis of optical transport in nano-layered polymers to address subtleties in the chromatic response of microlenses made from these materials. In particular this method explains the len's behavior in and around the reflection band of the materials. We wish to acknowledge support of funds from NSF through its Center for Layered Polymeric Systems (CLiPS) at Case Western Reserve University.

Sequential shrink photolithography for plastic microlens arrays

NASA Astrophysics Data System (ADS)

Dyer, David; Shreim, Samir; Jayadev, Shreshta; Lew, Valerie; Botvinick, Elliot; Khine, Michelle

2011-07-01

Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed thermoplastic sheet, the dots shrink to a fraction of their original size, which we then lithographically transfer onto photoresist-coated commodity shrink wrap film. This shrink film reduces in area by 95% when briefly heated, creating smooth convex photoresist bumps down to 30 µm. Taken together, this sequential shrink process provides a complete process to create microlenses, with an almost 99% reduction in area from the original pattern size. Finally, with a lithography molding step, we emboss these bumps into optical grade plastics such as cyclic olefin copolymer for functional microlens arrays.

Sequential shrink photolithography for plastic microlens arrays.

PubMed

Dyer, David; Shreim, Samir; Jayadev, Shreshta; Lew, Valerie; Botvinick, Elliot; Khine, Michelle

2011-07-18

Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed thermoplastic sheet, the dots shrink to a fraction of their original size, which we then lithographically transfer onto photoresist-coated commodity shrink wrap film. This shrink film reduces in area by 95% when briefly heated, creating smooth convex photoresist bumps down to 30 µm. Taken together, this sequential shrink process provides a complete process to create microlenses, with an almost 99% reduction in area from the original pattern size. Finally, with a lithography molding step, we emboss these bumps into optical grade plastics such as cyclic olefin copolymer for functional microlens arrays.

Sequential shrink photolithography for plastic microlens arrays

PubMed Central

Dyer, David; Shreim, Samir; Jayadev, Shreshta; Lew, Valerie; Botvinick, Elliot; Khine, Michelle

2011-01-01

Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children’s toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed thermoplastic sheet, the dots shrink to a fraction of their original size, which we then lithographically transfer onto photoresist-coated commodity shrink wrap film. This shrink film reduces in area by 95% when briefly heated, creating smooth convex photoresist bumps down to 30 µm. Taken together, this sequential shrink process provides a complete process to create microlenses, with an almost 99% reduction in area from the original pattern size. Finally, with a lithography molding step, we emboss these bumps into optical grade plastics such as cyclic olefin copolymer for functional microlens arrays. PMID:21863126

Compact self-aligning assemblies with refractive microlens arrays made by contactless embossing

NASA Astrophysics Data System (ADS)

Schulze, Jens; Ehrfeld, Wolfgang; Mueller, Holger; Picard, Antoni

1998-04-01

The hybrid integration of microlenses and arrays of microlenses in micro-optical systems is simplified using contactless embossing of microlenses (CEM) in combination with LIGA microfabrication. CEM is anew fabrication technique for the production of precise refractive microlens arrays. A high precision matrix of holes made by LIGA technique is used as a compression molding tool to form the microlenses. The tool is pressed onto a thermoplastic sample which is heated close to the glass transformation temperature of the material. The material bulges into the openings of the molding tool due to the applied pressure and forms lens-like spherical structures. The name refers to the fact that the surface of the microlens does not get in contact with the compression molding tool during the shaping process and optical quality of the surface is maintained. Microlenses and arrays of microlenses with lens diameters from 30 micrometers up to 700 micrometers and numerical aperture values of up to 0.25 have been fabricated in different materials. Cost-effectiveness in the production process, excellent optical performance and the feature of easy replication are the main advantages of this technique. The most promising feature of this method is the possibility to obtain self- aligned assemblies then can be further integrated into a micro-optical bench setup. The CEM fabrication method in combination with LIGA microfabrication considerably enhances the hybrid integration in micro-optical devices which results in a more cost-effective production of compact micro-opto-electro-mechanical systems.

Nitride microlens arrays for blue and ultraviolet wavelength applications

NASA Astrophysics Data System (ADS)

Oder, T. N.; Shakya, J.; Lin, J. Y.; Jiang, H. X.

2003-05-01

Nitride microlens arrays with sizes as small as 10 μm in diameter have been fabricated on GaN and AlN epilayers using the method of photoresist reflow and inductively coupled plasma dry etching. The focal lengths of the microlenses varied from 7-30 μm as determined by theoretical fitting as well as by the near-field scanning optical microscopy measurement. Scanning electron and atomic force microscopies were used to obtain the surface profile of the microlenses which were found to match very well with hemispherical fitting and a surface roughness value around 1 nm was obtained. Nitride microlens arrays would be naturally chosen for green/blue to deep ultraviolet wavelength applications. In addition, nitride microlenses offer the possibility of integrating nitride-based microsize photonic devices as well as of coupling light into, out of, and between arrays of III-nitride emitters for other applications, such as spatially resolved fluorescence spectroscopy studies of biological and medical systems and optical links, thereby further expanding the applications of III nitrides.

Fabrication of Nonperiodic Metasurfaces by Microlens Projection Lithography.

PubMed

Gonidec, Mathieu; Hamedi, Mahiar M; Nemiroski, Alex; Rubio, Luis M; Torres, Cesar; Whitesides, George M

2016-07-13

This paper describes a strategy that uses template-directed self-assembly of micrometer-scale microspheres to fabricate arrays of microlenses for projection photolithography of periodic, quasiperiodic, and aperiodic infrared metasurfaces. This method of "template-encoded microlens projection lithography" (TEMPL) enables rapid prototyping of planar, multiscale patterns of similarly shaped structures with critical dimensions down to ∼400 nm. Each of these structures is defined by local projection lithography with a single microsphere acting as a lens. This paper explores the use of TEMPL for the fabrication of a broad range of two-dimensional lattices with varying types of nonperiodic spatial distribution. The matching optical spectra of the fabricated and simulated metasurfaces confirm that TEMPL can produce structures that conform to expected optical behavior.

Antireflective Paraboloidal Microlens Film for Boosting Power Conversion Efficiency of Solar Cells.

PubMed

Fang, Chaolong; Zheng, Jun; Zhang, Yaoju; Li, Yijie; Liu, Siyuan; Wang, Weiji; Jiang, Tao; Zhao, Xuesong; Li, Zhihong

2018-06-21

Microlens arrays can improve light transmittance in optical devices or enhance the photoelectrical conversion efficiency of photovoltaic devices. Their surface morphology (aspect ratio and packed density) is vital to photon management in solar cells. Here, we report a 100% packed density paraboloidal microlens array (PMLA), with a large aspect ratio, fabricated by direct-write UV laser photolithography coupled with soft imprint lithography. Optical characterization shows that the PMLA structure can remarkably decrease the front-side reflectance of solar cell device. The measured electrical parameters of the solar cell device clearly and consistently demonstrate that the PMLA film can considerably improve the photoelectrical conversion efficiency. In addition, the PMLA film has superhydrophobic properties, verified by measurement of a large water contact angle, and can enhance the self-cleaning capability of solar cell devices.

Fabrication of microlens array with controllable high NA and tailored optical characteristics using confined ink-jetting

NASA Astrophysics Data System (ADS)

Wang, Li; Luo, Yu; Liu, ZengZeng; Feng, Xueming; Lu, Bingheng

2018-06-01

This work presents an economic and controllable fabricating method of high numerical aperture (NA) polymer microlens array (MLA) based on ink-jetting technology. The MLAs are ink-jetted to align on micro platforms patterned flexible PDMS substrate. The shape of a sole lens is constructed by the ink-jetted pre-cured polymer volume confined on a micro platform. In this way, MLAs with targeted geometries-as well as tailored optical characteristics-can be printed, leading to freely designed optical properties. High NA from 0.446 to 0.885 and focal lengths between 99.26 μm and 39.45 μm are demonstrated, confirming theoretical predictions. Particularly, both the simulations and experimental measurements in optical properties are carried out, demonstrating that microlenses with shapes beyond a hemisphere (CA > 90°) exhibits higher light utilization efficiency and wider viewing angle. Meanwhile, the MLAs are fabricated on flexible PDMS substrates and can be attached to other curved surfaces for wider field of view imaging and higher sensitivity.

Quasi-periodic concave microlens array for liquid refractive index sensing fabricated by femtosecond laser assisted with chemical etching.

PubMed

Zhang, F; Wang, C; Yin, K; Dong, X R; Song, Y X; Tian, Y X; Duan, J A

2018-02-05

In this study, a high-efficiency single-pulsed femtosecond laser assisted with chemical wet etching method has been proposed to obtain large-area concave microlens array (MLA). The quasi-periodic MLA consisting of about two million microlenses with tunable diameter and sag height by adjusting laser scanning speed and etching time is uniformly manufactured on fused silica and sapphire within 30 minutes. Moreover, the fabricated MLA behaves excellent optical focusing and imaging performance, which could be used to sense the change of the liquid refractive index (RI). In addition, it is demonstrated that small period and high RI of MLA could acquire high sensitivity and broad dynamic measurement range, respectively. Furthermore, the theoretical diffraction efficiency is calculated by the finite domain time difference (FDTD) method, which is in good agreement with the experimental results.

Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses

NASA Astrophysics Data System (ADS)

Kaganskiy, Arsenty; Fischbach, Sarah; Strittmatter, André; Rodt, Sven; Heindel, Tobias; Reitzenstein, Stephan

2018-04-01

We report on the realization of scalable single-photon sources (SPSs) based on single site-controlled quantum dots (SCQDs) and deterministically fabricated microlenses. The fabrication process comprises the buried-stressor growth technique complemented with low-temperature in-situ electron-beam lithography for the integration of SCQDs into microlens structures with high yield and high alignment accuracy. The microlens-approach leads to a broadband enhancement of the photon-extraction efficiency of up to (21 ± 2)% and a high suppression of multi-photon events with g (2)(τ = 0) < 0.06 without background subtraction. The demonstrated combination of site-controlled growth of QDs and in-situ electron-beam lithography is relevant for arrays of efficient SPSs which, can be applied in photonic quantum circuits and advanced quantum computation schemes.

Microlens fabrication by replica molding of frozen laser-printed droplets

NASA Astrophysics Data System (ADS)

Surdo, Salvatore; Diaspro, Alberto; Duocastella, Martí

2017-10-01

In this work, we synergistically combine laser-induced forward transfer (LIFT) and replica molding for the fabrication of microlenses with control of their geometry and size independent of the material or substrate used. Our approach is based on a multistep process in which liquid microdroplets of an aqueous solution are first printed on a substrate by LIFT. Following a freezing step, the microdroplets are used as a master to fabricate a polydimethylsiloxane (PDMS) mold. A subsequent replica molding step enables the creation of microlenses and microlens arrays on arbitrary selected substrates and by using different curable polymers. Thus, our method combines the rapid fabrication capabilities of LIFT and the perfectively smooth surface quality of the generated microdroplets, with the advantages of replica molding in terms of parallelization and materials flexibility. We demonstrate our strategy by generating microlenses of different photocurable polymers and by characterizing their optical and morphological properties.

Kaleidoscopic imaging patterns of complex structures fabricated by laser-induced deformation

PubMed Central

Zhang, Haoran; Yang, Fengyou; Dong, Jianjie; Du, Lena; Wang, Chuang; Zhang, Jianming; Guo, Chuan Fei; Liu, Qian

2016-01-01

Complex surface structures have stimulated a great deal of interests due to many potential applications in surface devices. However, in the fabrication of complex surface micro-/nanostructures, there are always great challenges in precise design, or good controllability, or low cost, or high throughput. Here, we present a route for the accurate design and highly controllable fabrication of surface quasi-three-dimensional (quasi-3D) structures based on a thermal deformation of simple two-dimensional laser-induced patterns. A complex quasi-3D structure, coaxially nested convex–concave microlens array, as an example, demonstrates our capability of design and fabrication of surface elements with this method. Moreover, by using only one relief mask with the convex–concave microlens structure, we have gotten hundreds of target patterns at different imaging planes, offering a cost-effective solution for mass production in lithography and imprinting, and portending a paradigm in quasi-3D manufacturing. PMID:27910852

Optical design of microlens array for CMOS image sensors

NASA Astrophysics Data System (ADS)

Zhang, Rongzhu; Lai, Liping

2016-10-01

The optical crosstalk between the pixel units can influence the image quality of CMOS image sensor. In the meantime, the duty ratio of CMOS is low because of its pixel structure. These two factors cause the low detection sensitivity of CMOS. In order to reduce the optical crosstalk and improve the fill factor of CMOS image sensor, a microlens array has been designed and integrated with CMOS. The initial parameters of the microlens array have been calculated according to the structure of a CMOS. Then the parameters have been optimized by using ZEMAX and the microlens arrays with different substrate thicknesses have been compared. The results show that in order to obtain the best imaging quality, when the effect of optical crosstalk for CMOS is the minimum, the best distance between microlens array and CMOS is about 19.3 μm. When incident light successively passes through microlens array and the distance, obtaining the minimum facula is around 0.347 um in the active area. In addition, when the incident angle of the light is 0o 22o, the microlens array has obvious inhibitory effect on the optical crosstalk. And the anti-crosstalk distance between microlens array and CMOS is 0 μm 162 μm.

An optical wavefront sensor based on a double layer microlens array.

PubMed

Lin, Vinna; Wei, Hsiang-Chun; Hsieh, Hsin-Ta; Su, Guo-Dung John

2011-01-01

In order to determine light aberrations, Shack-Hartmann optical wavefront sensors make use of microlens arrays (MLA) to divide the incident light into small parts and focus them onto image planes. In this paper, we present the design and fabrication of long focal length MLA with various shapes and arrangements based on a double layer structure for optical wavefront sensing applications. A longer focal length MLA could provide high sensitivity in determining the average slope across each microlens under a given wavefront, and spatial resolution of a wavefront sensor is increased by numbers of microlenses across a detector. In order to extend focal length, we used polydimethysiloxane (PDMS) above MLA on a glass substrate. Because of small refractive index difference between PDMS and MLA interface (UV-resin), the incident light is less refracted and focused in further distance. Other specific focal lengths could also be realized by modifying the refractive index difference without changing the MLA size. Thus, the wavefront sensor could be improved with better sensitivity and higher spatial resolution.

Micro-optical elements produced using an photo-embossing technique in photopolymers

NASA Astrophysics Data System (ADS)

O'Neill, Feidhlim T.; Rowsome, Ita C.; Carr, Alun J.; Daniels, Stephen M.; Gleeson, Michael R.; Kelly, John V.; Close, Ciara; Lawrence, Justin R.; Sheridan, John T.

2005-09-01

Micro-optical devices are very important in current high-tech consumer items. The development of future products depends on both the evolution of fabrication techniques and on the development of new low cost mass production methods. Polymers offer ease of fabrication and low cost and are therefore excellent materials for the development of micro-optical devices. Polymer optical devices include passive optical elements, such as microlens arrays and waveguides, as well as active devices such as polymer based lasers. One of the most important areas of micro-optics is that of microlens design, manufacture and testing. The wide diversity of fabrication methods used for the production of these elements indicates their importance. One of these fabrication techniques is photo-embossing. The use of the photo-embossing technique and a photopolymer holographic recording material will be examined in this paper. A discussion of current attempts to model the fabrication process and a review of the experimental method will be given.

Silicon Micromachined Microlens Array for THz Antennas

NASA Technical Reports Server (NTRS)

Lee, Choonsup; Chattopadhyay, Goutam; Mehdi, IImran; Gill, John J.; Jung-Kubiak, Cecile D.; Llombart, Nuria

2013-01-01

5 5 silicon microlens array was developed using a silicon micromachining technique for a silicon-based THz antenna array. The feature of the silicon micromachining technique enables one to microfabricate an unlimited number of microlens arrays at one time with good uniformity on a silicon wafer. This technique will resolve one of the key issues in building a THz camera, which is to integrate antennas in a detector array. The conventional approach of building single-pixel receivers and stacking them to form a multi-pixel receiver is not suited at THz because a single-pixel receiver already has difficulty fitting into mass, volume, and power budgets, especially in space applications. In this proposed technique, one has controllability on both diameter and curvature of a silicon microlens. First of all, the diameter of microlens depends on how thick photoresist one could coat and pattern. So far, the diameter of a 6- mm photoresist microlens with 400 m in height has been successfully microfabricated. Based on current researchers experiences, a diameter larger than 1-cm photoresist microlens array would be feasible. In order to control the curvature of the microlens, the following process variables could be used: 1. Amount of photoresist: It determines the curvature of the photoresist microlens. Since the photoresist lens is transferred onto the silicon substrate, it will directly control the curvature of the silicon microlens. 2. Etching selectivity between photoresist and silicon: The photoresist microlens is formed by thermal reflow. In order to transfer the exact photoresist curvature onto silicon, there needs to be etching selectivity of 1:1 between silicon and photoresist. However, by varying the etching selectivity, one could control the curvature of the silicon microlens. The figure shows the microfabricated silicon microlens 5 x5 array. The diameter of the microlens located in the center is about 2.5 mm. The measured 3-D profile of the microlens surface has a smooth curvature. The measured height of the silicon microlens is about 280 microns. In this case, the original height of the photoresist was 210 microns. The change was due to the etching selectivity of 1.33 between photoresist and silicon. The measured surface roughness of the silicon microlens shows the peak-to-peak surface roughness of less than 0.5 microns, which is adequate in THz frequency. For example, the surface roughness should be less than 7 microns at 600 GHz range. The SEM (scanning electron microscope) image of the microlens confirms the smooth surface. The beam pattern at 550 GHz shows good directivity.

Light management in perovskite solar cells and organic LEDs with microlens arrays

DOE PAGES

Peer, Akshit; Biswas, Rana; Park, Joong -Mok; ...

2017-04-28

Here, we demonstrate enhanced absorption in solar cells and enhanced light emission in OLEDs by light interaction with a periodically structured microlens array. We simulate n-i-p perovskite solar cells with a microlens at the air-glass interface, with rigorous scattering matrix simulations. The microlens focuses light in nanoscale regions within the absorber layer enhancing the solar cell. Optimal period of ~700 nm and microlens height of ~800-1000 nm, provides absorption (photocurrent) enhancement of 6% (6.3%). An external polymer microlens array on the air-glass side of the OLED generates experimental and theoretical enhancements >100%, by outcoupling trapped modes in the glass substrate.

Optimization of the Hartmann-Shack microlens array

NASA Astrophysics Data System (ADS)

de Oliveira, Otávio Gomes; de Lima Monteiro, Davies William

2011-04-01

In this work we propose to optimize the microlens-array geometry for a Hartmann-Shack wavefront sensor. The optimization makes possible that regular microlens arrays with a larger number of microlenses are replaced by arrays with fewer microlenses located at optimal sampling positions, with no increase in the reconstruction error. The goal is to propose a straightforward and widely accessible numerical method to calculate an optimized microlens array for a known aberration statistics. The optimization comprises the minimization of the wavefront reconstruction error and/or the number of necessary microlenses in the array. We numerically generate, sample and reconstruct the wavefront, and use a genetic algorithm to discover the optimal array geometry. Within an ophthalmological context, as a case study, we demonstrate that an array with only 10 suitably located microlenses can be used to produce reconstruction errors as small as those of a 36-microlens regular array. The same optimization procedure can be employed for any application where the wavefront statistics is known.

Fabrication of an infrared Shack-Hartmann sensor by combining high-speed single-point diamond milling and precision compression molding processes.

PubMed

Zhang, Lin; Zhou, Wenchen; Naples, Neil J; Yi, Allen Y

2018-05-01

A novel fabrication method by combining high-speed single-point diamond milling and precision compression molding processes for fabrication of discontinuous freeform microlens arrays was proposed. Compared with slow tool servo diamond broaching, high-speed single-point diamond milling was selected for its flexibility in the fabrication of true 3D optical surfaces with discontinuous features. The advantage of single-point diamond milling is that the surface features can be constructed sequentially by spacing the axes of a virtual spindle at arbitrary positions based on the combination of rotational and translational motions of both the high-speed spindle and linear slides. By employing this method, each micro-lenslet was regarded as a microstructure cell by passing the axis of the virtual spindle through the vertex of each cell. An optimization arithmetic based on minimum-area fabrication was introduced to the machining process to further increase the machining efficiency. After the mold insert was machined, it was employed to replicate the microlens array onto chalcogenide glass. In the ensuing optical measurement, the self-built Shack-Hartmann wavefront sensor was proven to be accurate in detecting an infrared wavefront by both experiments and numerical simulation. The combined results showed that precision compression molding of chalcogenide glasses could be an economic and precision optical fabrication technology for high-volume production of infrared optics.

Micron-scale lens array having diffracting structures

DOEpatents

Goldberg, Kenneth A

2013-10-29

A novel micron-scale lens, a microlens, is engineered to concentrate light efficiently onto an area of interest, such as a small, light-sensitive detector element in an integrated electronic device. Existing microlens designs imitate the form of large-scale lenses and are less effective at small sizes. The microlenses described herein have been designed to accommodate diffraction effects, which dominate the behavior of light at small length scales. Thus a new class of light-concentrating optical elements with much higher relative performance has been created. Furthermore, the new designs are much easier to fabricate than previous designs.

Misalignment corrections in optical interconnects

NASA Astrophysics Data System (ADS)

Song, Deqiang

Optical interconnects are considered a promising solution for long distance and high bitrate data transmissions, outperforming electrical interconnects in terms of loss and dispersion. Due to the bandwidth and distance advantage of optical interconnects, longer links have been implemented with optics. Recent studies show that optical interconnects have clear advantages even at very short distances---intra system interconnects. The biggest challenge for such optical interconnects is the alignment tolerance. Many free space optical components require very precise assembly and installation, and therefore the overall cost could be increased. This thesis studied the misalignment tolerance and possible alignment correction solutions for optical interconnects at backplane or board level. First the alignment tolerance for free space couplers was simulated and the result indicated the most critical alignments occur between the VCSEL, waveguide and microlens arrays. An in-situ microlens array fabrication method was designed and experimentally demonstrated, with no observable misalignment with the waveguide array. At the receiver side, conical lens arrays were proposed to replace simple microlens arrays for a larger angular alignment tolerance. Multilayer simulation models in CodeV were built to optimized the refractive index and shape profiles of the conical lens arrays. Conical lenses fabricated with micro injection molding machine and fiber etching were characterized. Active component VCSOA was used to correct misalignment in optical connectors between the board and backplane. The alignment correction capability were characterized for both DC and AC (1GHz) optical signal. The speed and bandwidth of the VCSOA was measured and compared with a same structure VCSEL. Based on the optical inverter being studied in our lab, an all-optical flip-flop was demonstrated using a pair of VCSOAs. This memory cell with random access ability can store one bit optical signal with set or reset beam. The operating conditions were studied to generate two stable states between the VCSOA pair. The entire functionality test was implemented with free space optical components.

Digital holographic characterization of liquid microlenses array fabricated in electrode-less configuration

NASA Astrophysics Data System (ADS)

Miccio, L.; Vespini, V.; Grilli, S.; Paturzo, M.; Finizio, A.; De Nicola, S.; Ferraro, P.

2009-06-01

We show how thin liquid film on polar dielectric substrate can form an array of liquid micro-lenses. The effect is driven by the pyroelectric effect leading to a new concept in electro-wetting (EW). EW is a viable method for actuation of liquids in microfluidic systems and requires the design and fabrication of complex electrodes for suitable actuation of liquids. When compared to conventional electrowetting devices, the pyroelectric effect allowed to have an electrode-less and circuitless configuration. In our case the surface electric charge induced by the thermal stimulus is able to pattern selectively the surface wettability according to geometry of the ferroelectric domains micro-engineered into the lithium niobate crystal. We show that different geometries of liquid microlenses can be obtained showing also a tuneability of the focal lenses down to 1.6 mm. Thousand of liquid microlenses, each with 100 μm diameter, can be formed and actuated. Also different geometries such as hemi-cylindrical and toroidal liquid structures can be easily obtained. By means of a digital holography method, an accurate characterization of the micro-lenses curvature is performed and presented. The preliminary results concerning the imaging capability of the micro-lens array are also reported. Microlens array can find application in medical stereo-endoscopy, imaging, telecommunication and optical data storage too.

Optimal condition for employing an axicon-generated Bessel beam to fabricate cylindrical microlens arrays

NASA Astrophysics Data System (ADS)

Luo, Zhi; Yin, Kai; Dong, Xinran; Duan, Ji’an

2018-05-01

A numerical algorithm, modelling the transformation from a Gaussian beam to a Bessel beam, is presented for the purpose to study the optimal condition for employing an axicon-generated Bessel beam to fabricate cylindrical microlens arrays (CMLAs). By applying the numerical algorithm to simulate the spatial intensity distribution behind the axicon under different defects of a rotund-apex and different diameter ratios of an incident beam to the axicon, we find that the diffraction effects formed by the axicon edge can be almost eliminated when the diameter ratio is less than 1:2, but the spatial intensity distribution is disturbed dramatically even a few tens of microns deviation of the apex, especially for the front part of the axicon-generated Bessel beam. Fortunately, the lateral intensity profile in the rear part still maintains a desirable Bessel curve. Therefore, the rear part of the Bessel area and the less than 1:2 diameter ratio are the optimal choice for employing an axicon-generated Bessel beam to implement surface microstructures fabrication. Furthermore, by applying the optimal conditions to direct writing microstructures on fused silica with a femtosecond (fs) laser, a large area close-packed CMLA is fabricated. The CMLA presents high quality and uniformity and its optical performance is also demonstrated.

An Optical Wavefront Sensor Based on a Double Layer Microlens Array

PubMed Central

Lin, Vinna; Wei, Hsiang-Chun; Hsieh, Hsin-Ta; Su, Guo-Dung John

2011-01-01

In order to determine light aberrations, Shack-Hartmann optical wavefront sensors make use of microlens arrays (MLA) to divide the incident light into small parts and focus them onto image planes. In this paper, we present the design and fabrication of long focal length MLA with various shapes and arrangements based on a double layer structure for optical wavefront sensing applications. A longer focal length MLA could provide high sensitivity in determining the average slope across each microlens under a given wavefront, and spatial resolution of a wavefront sensor is increased by numbers of microlenses across a detector. In order to extend focal length, we used polydimethysiloxane (PDMS) above MLA on a glass substrate. Because of small refractive index difference between PDMS and MLA interface (UV-resin), the incident light is less refracted and focused in further distance. Other specific focal lengths could also be realized by modifying the refractive index difference without changing the MLA size. Thus, the wavefront sensor could be improved with better sensitivity and higher spatial resolution. PMID:22346643

Dual-polarized light-field imaging micro-system via a liquid-crystal microlens array for direct three-dimensional observation.

PubMed

Xin, Zhaowei; Wei, Dong; Xie, Xingwang; Chen, Mingce; Zhang, Xinyu; Liao, Jing; Wang, Haiwei; Xie, Changsheng

2018-02-19

Light-field imaging is a crucial and straightforward way of measuring and analyzing surrounding light worlds. In this paper, a dual-polarized light-field imaging micro-system based on a twisted nematic liquid-crystal microlens array (TN-LCMLA) for direct three-dimensional (3D) observation is fabricated and demonstrated. The prototyped camera has been constructed by integrating a TN-LCMLA with a common CMOS sensor array. By switching the working state of the TN-LCMLA, two orthogonally polarized light-field images can be remapped through the functioned imaging sensors. The imaging micro-system in conjunction with the electric-optical microstructure can be used to perform polarization and light-field imaging, simultaneously. Compared with conventional plenoptic cameras using liquid-crystal microlens array, the polarization-independent light-field images with a high image quality can be obtained in the arbitrary polarization state selected. We experimentally demonstrate characters including a relatively wide operation range in the manipulation of incident beams and the multiple imaging modes, such as conventional two-dimensional imaging, light-field imaging, and polarization imaging. Considering the obvious features of the TN-LCMLA, such as very low power consumption, providing multiple imaging modes mentioned, simple and low-cost manufacturing, the imaging micro-system integrated with this kind of liquid-crystal microstructure driven electrically presents the potential capability of directly observing a 3D object in typical scattering media.

Plenoptic camera based on a liquid crystal microlens array

NASA Astrophysics Data System (ADS)

Lei, Yu; Tong, Qing; Zhang, Xinyu; Sang, Hongshi; Xie, Changsheng

2015-09-01

A type of liquid crystal microlens array (LCMLA) with tunable focal length by the voltage signals applied between its top and bottom electrodes, is fabricated and then the common optical focusing characteristics are tested. The relationship between the focal length and the applied voltage signals is given. The LCMLA is integrated with an image sensor and further coupled with a main lens so as to construct a plenoptic camera. Several raw images at different voltage signals applied are acquired and contrasted through the LCMLA-based plenoptic camera constructed by us. Our experiments demonstrate that through utilizing a LCMLA in a plenoptic camera, the focused zone of the LCMLA-based plenoptic camera can be shifted effectively only by changing the voltage signals loaded between the electrodes of the LCMLA, which is equivalent to the extension of the depth of field.

Large-scale fabrication of micro-lens array by novel end-fly-cutting-servo diamond machining.

PubMed

Zhu, Zhiwei; To, Suet; Zhang, Shaojian

2015-08-10

Fast/slow tool servo (FTS/STS) diamond turning is a very promising technique for the generation of micro-lens array (MLA). However, it is still a challenge to process MLA in large scale due to certain inherent limitations of this technique. In the present study, a novel ultra-precision diamond cutting method, as the end-fly-cutting-servo (EFCS) system, is adopted and investigated for large-scale generation of MLA. After a detailed discussion of the characteristic advantages for processing MLA, the optimal toolpath generation strategy for the EFCS is developed with consideration of the geometry and installation pose of the diamond tool. A typical aspheric MLA over a large area is experimentally fabricated, and the resulting form accuracy, surface micro-topography and machining efficiency are critically investigated. The result indicates that the MLA with homogeneous quality over the whole area is obtained. Besides, high machining efficiency, extremely small volume of control points for the toolpath, and optimal usage of system dynamics of the machine tool during the whole cutting can be simultaneously achieved.

A novel method for fabrication of continuous-relief optical elements

NASA Astrophysics Data System (ADS)

Guo, Xiaowei; Du, Jinglei; Chen, Mingyong; Ma, Yanqin; Zhu, Jianhua; Peng, Qinjun; Guo, Yongkang; Du, Chunlei

2005-08-01

A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled spatial-light-modulator (SLM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of digital SLM-based lithography and enzyme etching SHSG are discussed in detail, and microlens arrays, micro axicon-lens arrays and gratings with good profile were achieved. This method is simple, cheap and the aberration in processing procedures can be in-situ corrected in the step of designing mask, so it is a practical method to fabricate continuous profile for low-volume production.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Peer, Akshit; Biswas, Rana; Park, Joong -Mok

Here, we demonstrate enhanced absorption in solar cells and enhanced light emission in OLEDs by light interaction with a periodically structured microlens array. We simulate n-i-p perovskite solar cells with a microlens at the air-glass interface, with rigorous scattering matrix simulations. The microlens focuses light in nanoscale regions within the absorber layer enhancing the solar cell. Optimal period of ~700 nm and microlens height of ~800-1000 nm, provides absorption (photocurrent) enhancement of 6% (6.3%). An external polymer microlens array on the air-glass side of the OLED generates experimental and theoretical enhancements >100%, by outcoupling trapped modes in the glass substrate.

Tunable microlens arrays using polymer network liquid crystal

NASA Astrophysics Data System (ADS)

Ren, Hongwen; Fan, Yun-Hsing; Gauza, Sebastian; Wu, Shin-Tson

2004-02-01

A tunable-focus microlens array based on polymer network liquid crystal (PNLC) is demonstrated. The PNLC was prepared using an ultraviolet (UV) light exposure through a patterned photomask. The photocurable monomer in each of the UV exposed spot forms an inhomogeneous centro-symmetrical polymer network which acts as a lens when a homogeneous electric field is applied to the cell. The focal length of the microlens arrays is tunable with the applied voltage.

A light field microscope imaging spectrometer based on the microlens array

NASA Astrophysics Data System (ADS)

Yao, Yu-jia; Xu, Feng; Xia, Yin-xiang

2017-10-01

A new light field spectrometry microscope imaging system, which was composed by microscope objective, microlens array and spectrometry system was designed in this paper. 5-D information (4-D light field and 1-D spectrometer) of the sample could be captured by the snapshot system in only one exposure, avoiding the motion blur and aberration caused by the scanning imaging process of the traditional imaging spectrometry. Microscope objective had been used as the former group while microlens array used as the posterior group. The optical design of the system was simulated by Zemax, the parameter matching condition between microscope objective and microlens array was discussed significantly during the simulation process. The result simulated in the image plane was analyzed and discussed.

Electrowetting-driven variable-focus microlens on flexible surfaces

NASA Astrophysics Data System (ADS)

Li, Chenhui; Jiang, Hongrui

2012-06-01

We demonstrate a flexible, electrowetting-driven, variable-focus liquid microlens. The microlens is fabricated using a soft polymer polydimethylsiloxane. The lens can be smoothly wrapped onto a curved surface. A low-temperature fabrication process was developed to reduce the stress on and to avoid any damage to the polymer. The focal length of the microlens varies between -15.0 mm to +28.0 mm, depending on the applied voltage. The resolving power of the microlens is 25.39 line pairs per mm using a 1951 United States Air Force resolution chart. The typical response time of the lens is around 50 ms.

Three-dimensional imaging through turbid media based on polarization-difference liquid-crystal microlens array

NASA Astrophysics Data System (ADS)

Xin, Zhaowei; Wei, Dong; Li, Dapeng; Xie, Xingwang; Chen, Mingce; Zhang, Xinyu; Wang, Haiwei; Xie, Changsheng

2018-02-01

In this paper, a polarization difference liquid-crystal microlens array (PD-LCMLA) for three dimensional imaging application through turbid media is fabricated and demonstrated. This device is composed of a twisted nematic liquidcrystal cell (TNLCC), a polarizer and a liquid-crystal microlens array. The polarizer is sandwiched between the TNLCC and LCMLA to help the polarization difference system achieving the orthogonal polarization raw images. The prototyped camera for polarization difference imaging has been constructed by integrating the PD-LCMLA with an image sensor. The orthogonally polarized light-field images are recorded by switching the working state of the TNLCC. Here, by using a special microstructure in conjunction with the polarization-difference algorithm, we demonstrate that the three-dimensional information in the scattering media can be retrieved from the polarization-difference imaging system with an electrically tunable PD-LCMLA. We further investigate the system's potential function based on the flexible microstructure. The microstructure provides a wide operation range in the manipulation of incident beams and also emerges multiple operation modes for imaging applications, such as conventional planar imaging, polarization imaging mode, and polarization-difference imaging mode. Since the PD-LCMLA demonstrates a very low power consumption, multiple imaging modes and simple manufacturing, this kind of device presents a potential to be used in many other optical and electro-optical systems.

Spatial control of photoemitted electron beams using a microlens-array transverse-shaping technique

DOE PAGES

Halavanau, A.; Qiang, G.; Ha, G.; ...

2017-10-26

A transversely inhomogeneous laser distribution on the photocathode surface generally produces electron beams with degraded beam quality. In this paper, we explore the use of microlens arrays to dramatically improve the transverse uniformity of an ultraviolet drive-laser pulse used in a photoinjector. Here, we also demonstrate a capability of microlens arrays to generate transversely modulated electron beams and present an application of such a feature to diagnose the properties of a magnetized beam.

Electrowetting-driven variable-focus microlens on flexible surfaces.

PubMed

Li, Chenhui; Jiang, Hongrui

2012-06-04

We demonstrate a flexible, electrowetting-driven, variable-focus liquid microlens. The microlens is fabricated using a soft polymer polydimethylsiloxane. The lens can be smoothly wrapped onto a curved surface. A low-temperature fabrication process was developed to reduce the stress on and to avoid any damage to the polymer. The focal length of the microlens varies between -15.0 mm to +28.0 mm, depending on the applied voltage. The resolving power of the microlens is 25.39 line pairs per mm using a 1951 United States Air Force resolution chart. The typical response time of the lens is around 50 ms.

Electrowetting-driven variable-focus microlens on flexible surfaces

PubMed Central

Li, Chenhui; Jiang, Hongrui

2012-01-01

We demonstrate a flexible, electrowetting-driven, variable-focus liquid microlens. The microlens is fabricated using a soft polymer polydimethylsiloxane. The lens can be smoothly wrapped onto a curved surface. A low-temperature fabrication process was developed to reduce the stress on and to avoid any damage to the polymer. The focal length of the microlens varies between −15.0 mm to +28.0 mm, depending on the applied voltage. The resolving power of the microlens is 25.39 line pairs per mm using a 1951 United States Air Force resolution chart. The typical response time of the lens is around 50 ms. PMID:22904571

Implementation and image processing of a multi-focusing bionic compound eye

NASA Astrophysics Data System (ADS)

Wang, Xin; Guo, Yongcai; Luo, Jiasai

2018-01-01

In this paper, a new BCE with multi-focusing microlens array (MLA) was proposed. The BCE consist of detachable micro-hole array (MHA), multi-focusing MLA and spherical substrate, thus allowing it to have a large FOV without crosstalk and stray light. The MHA was fabricated by the precision machining and the parameters of the microlens varied depend on the aperture of micro-hole, through which the implementation of the multi-focusing MLA was realized under the negative pressure. Without the pattern transfer and substrate reshaping, the whole fabrication method was capable of accomplishing within several minutes by using microinjection technology. Furthermore, the method is cost-effective and easy for operation, thus providing a feasible method for the mass production of the BCE. The corresponding image processing was used to realize the image stitching for the sub-image of each single microlens, which offering an integral image in large FOV. The image stitching was implemented through the overlap between the adjacent sub-images and the feature points between the adjacent sub-images were captured by the Harris point detection. By using the adaptive non-maximal suppression, numerous potential mismatching points were eliminated and the algorithm efficiency was proved effectively. Following this, the random sample consensus (RANSAC) was used for feature points matching, by which the relation of projection transformation of the image is obtained. The implementation of the accurate image matching was then realized after the smooth transition by weighted average method. Experimental results indicate that the image-stitching algorithm can be applied for the curved BCE in large field.

Vertical integration of array-type miniature interferometers at wafer level by using multistack anodic bonding

NASA Astrophysics Data System (ADS)

Wang, Wei-Shan; Wiemer, Maik; Froemel, Joerg; Enderlein, Tom; Gessner, Thomas; Lullin, Justine; Bargiel, Sylwester; Passilly, Nicolas; Albero, Jorge; Gorecki, Christophe

2016-04-01

In this work, vertical integration of miniaturized array-type Mirau interferometers at wafer level by using multi-stack anodic bonding is presented. Mirau interferometer is suitable for MEMS metrology and for medical imaging according to its vertical-, lateral- resolutions and working distances. Miniaturized Mirau interferometer can be a promising candidate as a key component of an optical coherence tomography (OCT) system. The miniaturized array-type interferometer consists of a microlens doublet, a Si-based MEMS Z scanner, a spacer for focus-adjustment and a beam splitter. Therefore, bonding technologies which are suitable for heterogeneous substrates are of high interest and necessary for the integration of MEMS/MOEMS devices. Multi-stack anodic bonding, which meets the optical and mechanical requirements of the MOEMS device, is adopted to integrate the array-type interferometers. First, the spacer and the beam splitter are bonded, followed by bonding of the MEMS Z scanner. In the meanwhile, two microlenses, which are composed of Si and glass wafers, are anodically bonded to form a microlens doublet. Then, the microlens doublet is aligned and bonded with the scanner/spacer/beam splitter stack. The bonded array-type interferometer is a 7- wafer stack and the thickness is approximately 5mm. To separate such a thick wafer stack with various substrates, 2-step laser cutting is used to dice the bonded stack into Mirau chips. To simplify fabrication process of each component, electrical connections are created at the last step by mounting a Mirau chip onto a flip chip PCB instead of through wafer vias. Stability of Au/Ti films on the MEMS Z scanner after anodic bonding, laser cutting and flip chip bonding are discussed as well.

Design and fabrication of a multi-focusing artificial compound eyes with negative meniscus substrate

NASA Astrophysics Data System (ADS)

Luo, Jiasai; Guo, Yongcai; Wang, Xin; Fan, Fenglian

2017-04-01

Miniaturized artificial compound eyes with a large field of view (FOV) have potential application in the area of micro-optical-electro-mechanical-system (MOEMS). A new non-uniform microlens array (MLA) on a negative meniscus substrate, fabricated by the melting photoresist method, was proposed in this paper. The multi-focusing MLA reduced the defocus effectively, which was caused by the uniform array on a spherical substrate. Moreover, like most ommatidia in compound eyes, each microlens of the multi-focusing MLA was arranged in one of the eleven concentric circles. In order to match with the multi-focusing MLA and avoid the total reflection, the negative meniscus substrate was fabricated by a homebuilt mold with a micro-hole array and polydimethylsiloxane coelomic compartment attached. The coelomic compartment is capable of offering an excellent injection environment without bubbles and impurities. Due to the direct 3D implementation of the MLA, rich available materials can be used by this method without substrate reshaping. As the molding material, the ultraviolet curing adhesive NOA81 can be cured within ten few seconds under ultraviolet which relieve intensive labor and protect the stereolithography apparatus effectively. The experimental results show that this new MLA has a better imaging performance, higher light usage efficiency and larger FOV because of the negative meniscus and multi-focusing MLA. Moreover, due to the homebuilt mold, more accurate geometrical parameters and shorter processing cycle were realized. Accordingly, together with an appropriate hardware, this MLA has diverse potential applications in medical imaging, military and machine vision.

Wide-angle camera with multichannel architecture using microlenses on a curved surface.

PubMed

Liang, Wei-Lun; Shen, Hui-Kai; Su, Guo-Dung J

2014-06-10

We propose a multichannel imaging system that combines the principles of an insect's compound eye and the human eye. The optical system enables a reduction in track length of the imaging device to achieve miniaturization. The multichannel structure is achieved by a curved microlens array, and a Hypergon lens is used as the main lens to simulate the human eye, achieving large field of view (FOV). With this architecture, each microlens of the array transmits a segment of the overall FOV. The partial images are recorded in separate channels and stitched together to form the final image of the whole FOV by image processing. The design is 2.7 mm thick, with 59 channels; the 100°×80° full FOV is optimized using ZEMAX ray-tracing software on an image plane. The image plane size is 4.53  mm×3.29  mm. Given the recent progress in the fabrication of microlenses, this image system has the potential to be commercialized in the near future.

Microlens Array/Pinhole Mask to Suppress Starlight for Direct Exoplanet Detection

NASA Astrophysics Data System (ADS)

Zimmerman, Neil

Direct imaging of habitable exoplanets is a key priority of NASA’s Astrophysics roadmap, “Enduring Quests, Daring Visions.” A coronagraphic starlight suppression system situated on a large space telescope offers a viable path to achieving this goal. This type of instrument is central to both the LUVOIR and HabEx mission concepts currently under study for the 2020 Decadal Survey. To directly image an Earth-like exoplanet, an instrument must be sensitive to objects ten billion times dimmer than their parent star. Advanced coronagraphs are designed to modify the shape of the star’s image so that it does not overwhelm the planet's light. Coronagraphs are complex to design and fabricate, tend to sacrifice a significant portion of the exoplanet light entering the telescope, and are highly sensitive to errors in the telescope. The proposed work reduces the demands on the coronagraph and its sensitivity to errors in the telescope, by changing how we implement optics in the spectrograph following the coronagraph. Through optical analysis and modeling, we have found that a microlens array with a specially arranged pattern of pinholes can suppress residual starlight in the scientific image after the coronagraph by more than two orders of magnitude. This added layer of starlight rejection could be used to relax the extreme observatory stability requirements for exo-Earth imaging applications, for example shifting the wavefront stability requirement from a few picometers to a few nanometers. Ultimately this translates to the instrument detecting and spectrally characterizing more exoplanets than a conventional coronagraph system. This microlens/pinhole concept is also compatible with starshadebased starlight suppression systems. The proposed microlens/pinhole device is entirely passive and augments the performance of existing coronagraph designs, while potentially reducing their cost and risk for mission implementation. Our APRA proposal would support a testbed demonstration of this novel concept. Our plan is to design and procure the combined microlens-pinhole array, verify its fundamental optical properties on a breadboard at Goddard Space Flight Center, integrate the device onto an existing coronagraph testbed at Space Telescope Science Institute, and test its performance.

Design and fabrication of an elliptical micro-lens array with grating for laser safety

NASA Astrophysics Data System (ADS)

Li, L. H.; Wu, B. Q.; Chan, C. Y.; Lee, W. B.; Dong, L. H.

2015-10-01

With the enormous expansion of laser usage in medicine, industry and research, all facilities must formulate and adhere to specific safety methods that appropriately address user protection. The protective ellipticalal microstructure with grating is a novel technology which can provide the principal means of ensuring against ocular injury, and must be worn at all times during laser operation. On the basis of Fresnel's law and the diffractive law, Solidworks and Lighttools software are applied to design the elliptical micro-lens array and correspondent grating. The height of the microstructure is 100um and its period is 3mm. The period of grating is 5um. It is shown that the amount of emergent light of a specific wavelength (1064nm) can reflect more than 40° from the incident light through simulation, while the incident light is perpendicular to the microstructure. The fabrication adopts the ultra-precision single point diamond method and injection molding method. However, it is found in the test that the surface roughness has a serious effect on the angle between the emergent and incident light. As a result, the element can reflect the vertical incidence beam into a tilted emergent beam with a certain angular degree , as well as protecting users from laser damage injures.

Design and fabrication of a microlens on the sidewall of an optical fiber with a metallized 45 degrees end face.

PubMed

Kim, Myun-Sik; Jo, Kyoung-Woo; Lee, Jong-Hyun

2005-07-01

We propose a method for designing a self-aligned microlens. We have improved its fabrication by employing metallization on a 45 degrees angled surface of the optical fiber. We designed the focal length of the microlens to be 14.0 microm, considering the dimensions of a scanning near-field optical microscopy (SNOM) probe, and we calculated possible dimensions of diameter and height by the ray-tracing method. The modeling of lens formation was also carried out with two assumptions: no volume change and no movement of peripheral parts of the photoresist (PR) on the substrate during reflow. To fabricate a microlens of diameter 16.0 microm and height 5.0 microm we exposed a coated PR to UV light guided into the optical fiber, followed by optimized reflow of 150 degrees C for 2 min. For this microlens the focal length and the beam waist were 14.0 and 1.4 microm, respectively. This lens can be used for compact optical data storage.

Enhancing the imaging quality and fabrication efficiency of bionic compound eyes using a sandwich structure

NASA Astrophysics Data System (ADS)

Luo, Jiasai; Guo, Yongcai; Wang, Xin

2018-06-01

This paper puts forward a novel method for fabrication of sandwich-structured BCE using a detachable micro-hole array (MHA) prepared by 3D printing. Compared with most traditional methods, 3D printing enables effective implementation of direct micro-fabrication for curved BCE without the pattern transfer and substrate reshaping process. This 3D fabrication method allows rapid fabrication of the curved BCE and automatic assembly of the detachable MHA using a custom-built mold under negative pressure. The formation of a multi-focusing micro-lens array (MLA) was realized by adjusting the parameters of the curved detachable MHA. The imaging performance was effectively enhanced by the sandwich structure that consist of the multi-focusing MLA, the outer detachable MHA and the inner solidified MHA. This method is suitable for mass production due to its advantages as a time-saving, cost-effective and simple process. Optical design software was used to analyze the optical properties, and an imaging simulation was performed.

Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

PubMed Central

Lo, Joe; Chen, Shih-Jui; Fang, Qiyin; Papaioannou, Thanassis; Kim, Eun-Sok; Gundersen, Martin; Marcu, Laura

2009-01-01

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices. PMID:22399943

An ultrahigh-speed color video camera operating at 1,000,000 fps with 288 frame memories

NASA Astrophysics Data System (ADS)

Kitamura, K.; Arai, T.; Yonai, J.; Hayashida, T.; Kurita, T.; Maruyama, H.; Namiki, J.; Yanagi, T.; Yoshida, T.; van Kuijk, H.; Bosiers, Jan T.; Saita, A.; Kanayama, S.; Hatade, K.; Kitagawa, S.; Etoh, T. Goji

2008-11-01

We developed an ultrahigh-speed color video camera that operates at 1,000,000 fps (frames per second) and had capacity to store 288 frame memories. In 2005, we developed an ultrahigh-speed, high-sensitivity portable color camera with a 300,000-pixel single CCD (ISIS-V4: In-situ Storage Image Sensor, Version 4). Its ultrahigh-speed shooting capability of 1,000,000 fps was made possible by directly connecting CCD storages, which record video images, to the photodiodes of individual pixels. The number of consecutive frames was 144. However, longer capture times were demanded when the camera was used during imaging experiments and for some television programs. To increase ultrahigh-speed capture times, we used a beam splitter and two ultrahigh-speed 300,000-pixel CCDs. The beam splitter was placed behind the pick up lens. One CCD was located at each of the two outputs of the beam splitter. The CCD driving unit was developed to separately drive two CCDs, and the recording period of the two CCDs was sequentially switched. This increased the recording capacity to 288 images, an increase of a factor of two over that of conventional ultrahigh-speed camera. A problem with the camera was that the incident light on each CCD was reduced by a factor of two by using the beam splitter. To improve the light sensitivity, we developed a microlens array for use with the ultrahigh-speed CCDs. We simulated the operation of the microlens array in order to optimize its shape and then fabricated it using stamping technology. Using this microlens increased the light sensitivity of the CCDs by an approximate factor of two. By using a beam splitter in conjunction with the microlens array, it was possible to make an ultrahigh-speed color video camera that has 288 frame memories but without decreasing the camera's light sensitivity.

Semiconductor light-emitting devices having concave microstructures providing improved light extraction efficiency and method for producing same

DOEpatents

Tansu, Nelson; Gilchrist, James F; Ee, Yik-Khoon; Kumnorkaew, Pisist

2013-11-19

A conventional semiconductor LED is modified to include a microlens layer over its light-emitting surface. The LED may have an active layer including at least one quantum well layer of InGaN and GaN. The microlens layer includes a plurality of concave microstructures that cause light rays emanating from the LED to diffuse outwardly, leading to an increase in the light extraction efficiency of the LED. The concave microstructures may be arranged in a substantially uniform array, such as a close-packed hexagonal array. The microlens layer is preferably constructed of curable material, such as polydimethylsiloxane (PDMS), and is formed by soft-lithography imprinting by contacting fluid material of the microlens layer with a template bearing a monolayer of homogeneous microsphere crystals, to cause concave impressions, and then curing the material to fix the concave microstructures in the microlens layer and provide relatively uniform surface roughness.

Planar waveguide microlenses for nonblocking photonic switches and optical interconnects

NASA Astrophysics Data System (ADS)

Glebov, Alexei L.; Huang, Lidu; Lee, Michael; Aoki, Shigenori; Yokouchi, Kishio

2004-09-01

Different types of planar waveguide microlenses are fabricated with PLC technologies from a variety of optical materials such as silica, photo-definable epoxy resins, and a number of other optical polymers. Hybrid microlenses are also fabricated in which the base of the lens, with a double concave gap, is formed from silica and the gap is filled with an optical polymer. The optimized lens structures provide the maximum coupling efficiencies between the input and output channels at distances up to 100 mm with a minimum channel pitch of 0.5-0.7 mm. Experimental and theoretical studies provide results on collimation and focusing properties of single and double microlenses made of silica, polymer, and silica/polymer. The evaluation of the temperature and wavelength effects on the collimation characteristics of the lenses demonstrate that the single lenses are more stable and, thus, more suitable for operations under varying conditions. Examples of the planar waveguide microlens applications are presented. In one application the microlens arrays are integrated in fast electrooptic photonic switching modules. In the other application the microlenses are embedded in the backplanes with nonblocking optical interconnects.

Fabrication and evaluation of variable focus and large deformation plano-convex microlens based on non-ionic poly(vinyl chloride)/dibutyl adipate gels

NASA Astrophysics Data System (ADS)

Kim, Sang-Youn; Yeo, Myoung; Shin, Eun-Jae; Park, Won-Hyeong; Jang, Jong-Seok; Nam, Byeong-Uk; Bae, Jin Woo

2015-11-01

In this paper, we propose a variable focus microlens module based on a transparent, electroactive, and non-ionic PVC/DBA gel. A non-ionic PVC/DBA (nPVC) gel on an ITO glass was confined beneath a rigid annular electrode, and applied pressure squeezed a bulge of the nPVC gel into the annular electrode, resulting in a hemispherical plano-convex nPVC gel microlens. The proposed nPVC gel microlens was analyzed and optimized. When voltage is applied to the circular perimeter (the annular electrode) of this fabricated microlens, electrically induced creep deformation of the nPVC gel occurs, changing its optical focal length. The focal length remarkably increases from 3.8 mm up to 14.3 mm with increasing applied voltages from 300 V to 800 V. Due to its compact, transparent, and electroactive characteristics, the proposed nPVC gel microlens can be easily inserted into small consumer electronic devices, such as digital cameras, camcorders, cell phones, and other portable optical devices.

Microlens array for focusing airborne ultrasound using heated wire grid

NASA Astrophysics Data System (ADS)

Cai, Liang-Wu; Sánchez-Dehesa, José

2007-10-01

This letter reports on the focusing of airborne ultrasound by a simple grid of heated wires. The focusing is analogous to that of an array of optical microlenses. The focusing pattern is determined by the spacing between wires, and the focusing areas are tightly confined with a great "depth of field." Such acoustical microlens arrays have great potentials for shaping beams produced by ultrasonic transducers, in applications such as ultrasonic cleaning and nondestructive testing.

Design a freeform microlens array module for any arbitrary-shape collimated beam shaping and color mixing

NASA Astrophysics Data System (ADS)

Chen, Enguo; Wu, Rengmao; Guo, Tailiang

2014-06-01

Collimated beam shaping with freeform surface usually employs a predefined mapping to tailor one or multiple freeform surfaces. Limitation on those designs is that the source, the freeform optics and the target are in fixed one-to-one correspondence with each other. To overcome this drawback, this paper presents a kind of freeform microlens array module integrated with an ultra-thin freeform microlens array and a condenser lens to reshape any arbitrary-shape collimated beam into a prescribed uniform rectangular illumination and achieve color mixing. The design theory is explicitly given, and some key issues are addressed. Several different application examples are given, and the target is obtained with high uniformity and energy efficiency. This freeform microlens array module, which shows better flexibility and practicality than the regular designs, can be used not only to reshape any arbitrary-shape collimated beam (or a collimated beam integrated with several sub-collimated beams), but also most importantly to achieve color mixing. With excellent optical performance and ultra-compact volume, this optical module together with the design theory can be further introduced into other applications and will have a huge market potential in the near future.

Adaptive microlens array based on electrically charged polyvinyl chloride/dibutyl phthalate gel

NASA Astrophysics Data System (ADS)

Xu, Miao; Ren, Hongwen

2016-09-01

We prepared an adaptive microlens array (MLA) using a polyvinyl chloride/dibutyl phthalate gel and an indium-tin-oxide (ITO) glass substrate. The gel forms a membrane on the glass substrate and the ITO electrode has a ring array pattern. When the membrane is electrically charged by a DC voltage, the surface of the membrane above each circular electrode in the ring array can be deformed with a convex shape. As a result, the membrane functions as an MLA. By applying a voltage from 20 to ˜65 V to the electrode, the focal length of each microlens can be tuned from 300 to ˜160 μm. The dynamic response time can by reduced largely by changing the polarity of the DC voltage. Due to the advantages of optical isotropy, compact structure, and good stability, our MLA has potential applications in imaging, biometrics, and electronic displays.

Fabrication of long-focal-length plano-convex microlens array by combining the micro-milling and injection molding processes.

PubMed

Chen, Lei; Kirchberg, Stefan; Jiang, Bing-Yan; Xie, Lei; Jia, Yun-Long; Sun, Lei-Lei

2014-11-01

A uniform plano-convex spherical microlens array with a long focal length was fabricated by combining the micromilling and injection molding processes in this work. This paper presents a quantitative study of the injection molding process parameters on the uniformity of the height of the microlenses. The variation of the injection process parameters, i.e., barrel temperature, mold temperature, injection speed, and packing pressure, was found to have a significant effect on the uniformity of the height of the microlenses, especially the barrel temperature. The filling-to-packing switchover point is also critical to the uniformity of the height of the microlenses. The optimal uniformity was achieved when the polymer melts completely filled the mold cavity, or even a little excessively filled the cavity, during the filling stage. In addition, due to the filling resistance, the practical filling-to-packing switchover point can vary with the change of the filling processing conditions and lead to a non-negligible effect on the uniformity of the height of the microlenses. Furthermore, the effect of injection speed on the uniformity of the height of the microlenses was analyzed in detail. The results indicated that the effect of injection speed on the uniformity of the height of the microlenses is mainly attributed to the two functions of injection speed: transferring the filling-to-packing switchover point and affecting the distribution of residual flow stress in the polymer melt.

Low-cost laser diode array

DOEpatents

Freitas, B.L.; Skidmore, J.A.

1999-06-01

A substrate is used to fabricate a low-cost laser diode array. A substrate is machined from an electrically insulative material that is thermally conductive, or two substrates can be bonded together in which the top substrate is electrically as well as thermally conductive. The substrate thickness is slightly longer than the cavity length, and the width of the groove is wide enough to contain a bar and spring (which secures the laser bar firmly along one face of the groove). The spring also provides electrical continuity from the backside of the bar to the adjacent metalization layer on the laser bar substrate. Arrays containing one or more bars can be formed by creating many grooves at various spacings. Along the groove, many bars can be adjoined at the edges to provide parallel electrical conduction. This architecture allows precise and predictable registration of an array of laser bars to a self-aligned microlens array at low cost. 19 figs.

Low-cost laser diode array

DOEpatents

Freitas, Barry L.; Skidmore, Jay A.

1999-01-01

A substrate is used to fabricate a low-cost laser diode array. A substrate is machined from an electrically insulative material that is thermally conductive, or two substrates can be bonded together in which the top substrate is electrically as well as thermally conductive. The substrate thickness is slightly longer than the cavity length, and the width of the groove is wide enough to contain a bar and spring (which secures the laser bar firmly along one face of the groove). The spring also provides electrical continuity from the backside of the bar to the adjacent metalization layer on the laser bar substrate. Arrays containing one or more bars can be formed by creating many grooves at various spacings. Along the groove, many bars can be adjoined at the edges to provide parallel electrical conduction. This architecture allows precise and predictable registration of an array of laser bars to a self-aligned microlens array at low cost.

Three-dimensional integration of microoptical components buried inside photosensitive glass by femtosecond laser direct writing

NASA Astrophysics Data System (ADS)

Wang, Zhongke; Sugioka, Koji; Midorikawa, Katsumi

2007-12-01

We report the three-dimensional (3D) integration of microoptical components such as microlenses, micromirrors and optical waveguides in a single glass chip by femtosecond (fs) laser direct writing. First, two types of microoptical lenses were fabricated inside photosensitive Foturan glass by forming hollow microstructures using fs laser direct writing followed by thermal treatment, successive wet etching and additional annealing. One type of lens is the cylindrical microlens with a curvature radius R of 1.0 mm, and the other is the plano-convex microlens with radius R of 0.75 mm. Subsequently, by the continuous procedure of hollow microstructure fabrication, a micromirror was integrated with the plano-convex microlens in the single glass chip. Further integration of waveguides was performed by internal refractive index modification using fs laser direct writing after the hollow structure fabrication of the microlens and the micromirror. A demonstration of the laser beam transmission in the integrated optical microdevice shows that the 3D integration of waveguides with a micromirror and a microoptical lens in a single glass chip is highly effective for light beam guiding and focusing.

Adaptive lenticular microlens array based on voltage-induced waves at the surface of polyvinyl chloride/dibutyl phthalate gels.

PubMed

Xu, Miao; Jin, Boya; He, Rui; Ren, Hongwen

2016-04-18

We report a new approach to preparing a lenticular microlens array (LMA) using polyvinyl chloride (PVC)/dibutyl phthalate (DBP) gels. The PVD/DBP gels coated on a glass substrate form a membrane. With the aid of electrostatic repulsive force, the surface of the membrane can be reconfigured with sinusoidal waves by a DC voltage. The membrane with wavy surface functions as a LMA. By switching over the anode and cathode, the convex shape of each lenticular microlens in the array can be converted to the concave shape. Therefore, the LMA can present a large dynamic range. The response time is relatively fast and the driving voltage is low. With the advantages of compact structure, optical isotropy, and good mechanical stability, our LMA has potential applications in imaging, information processing, biometrics, and displays.

Plenoptic projection fluorescence tomography.

PubMed

Iglesias, Ignacio; Ripoll, Jorge

2014-09-22

A new method to obtain the three-dimensional localization of fluorochrome distributions in micrometric samples is presented. It uses a microlens array coupled to the image port of a standard microscope to obtain tomographic data by a filtered back-projection algorithm. Scanning of the microlens array is proposed to obtain a dense data set for reconstruction. Simulation and experimental results are shown and the implications of this approach in fast 3D imaging are discussed.

Fabrication and Characterization of Flexible Electrowetting on Dielectrics (EWOD) Microlens

PubMed Central

Li, Chenhui; Jiang, Hongrui

2014-01-01

We present a flexible variable-focus converging microlens actuated by electrowetting on dielectric (EWOD). The microlens is made of two immiscible liquids and a soft polymer, polydimethylsiloxane (PDMS). Parylene intermediate layer is used to produce robust flexible electrode on PDMS. A low-temperature PDMS-compatible fabrication process has been developed to reduce the stress on the lens structure. The lens has been demonstrated to be able to conform to curved surfaces smoothly. The focal length of the microlens is 29–38 mm on a flat surface, and 31–41 mm on a curved surface, varying with the voltage applied. The resolving power of the microlens is 25.39 line pairs per mm by a 1951 United States Air Force (USAF) resolution chart and the lens aberrations are measured by a Shack-Hartmann wavefront sensor. The focal length behavior on a curved surface is discussed and for the current lens demonstrated the focal length is slightly longer on the curved surface as a result of the effect of the curved PDMS substrate. PMID:25360324

Liquid-crystal microlens array with swing and adjusting focus and constructed by dual patterned ITO-electrodes

NASA Astrophysics Data System (ADS)

Dai, Wanwan; Xie, Xingwang; Li, Dapeng; Han, Xinjie; Liu, Zhonglun; Wei, Dong; Xin, Zhaowei; Zhang, Xinyu; Wang, Haiwei; Xie, Changsheng

2018-02-01

Under the condition of existing intense turbulence, the object's wavefront may be severely distorted. So, the wavefront sensors based on the traditional microlens array (MLA) with a fixed focal length can not be used to measure the wavefront effectively. In order to obtain a larger measurement range and higher measurement accuracy, we propose a liquid-crystal microlens array (LCMLA) with needed ability of swing focus over the focal plane and further adjusting focal length, which is constructed by a dual patterned ITO electrodes. The main structure of the LCMLA is divided into two layers, which are made of glass substrate with ITO transparent electrodes. The top layer of each liquid-crystal microlens consists of four rectangular electrodes, and the bottom layer is a circular electrode. In common optical measurements performed, the operations are carried out such as adding the same signal voltage over four electrodes of each microlens to adjust the focal length of the lens cell and adding a signal voltage with different RMS amplitude to adjust the focus position on the focal plane. Experiments show that the LCMLA developed by us demonstrate a desired focal length adjustable function and dynamic swing ability, so as to indicate that the method can be used not only to measure wavefront but also correct the wavefront with strong distortion.

Using a plenoptic camera to measure distortions in wavefronts affected by atmospheric turbulence

NASA Astrophysics Data System (ADS)

Eslami, Mohammed; Wu, Chensheng; Rzasa, John; Davis, Christopher C.

2012-10-01

Ideally, as planar wave fronts travel through an imaging system, all rays, or vectors pointing in the direction of the propagation of energy are parallel, and thus the wave front is focused to a particular point. If the wave front arrives at an imaging system with energy vectors that point in different directions, each part of the wave front will be focused at a slightly different point on the sensor plane and result in a distorted image. The Hartmann test, which involves the insertion of a series of pinholes between the imaging system and the sensor plane, was developed to sample the wavefront at different locations and measure the distortion angles at different points in the wave front. An adaptive optic system, such as a deformable mirror, is then used to correct for these distortions and allow the planar wave front to focus at the point desired on the sensor plane, thereby correcting the distorted image. The apertures of a pinhole array limit the amount of light that reaches the sensor plane. By replacing the pinholes with a microlens array each bundle of rays is focused to brighten the image. Microlens arrays are making their way into newer imaging technologies, such as "light field" or "plenoptic" cameras. In these cameras, the microlens array is used to recover the ray information of the incoming light by using post processing techniques to focus on objects at different depths. The goal of this paper is to demonstrate the use of these plenoptic cameras to recover the distortions in wavefronts. Taking advantage of the microlens array within the plenoptic camera, CODE-V simulations show that its performance can provide more information than a Shack-Hartmann sensor. Using the microlens array to retrieve the ray information and then backstepping through the imaging system provides information about distortions in the arriving wavefront.

Fabrication of micro-lens array on convex surface by meaning of micro-milling

NASA Astrophysics Data System (ADS)

Zhang, Peng; Du, Yunlong; Wang, Bo; Shan, Debin

2014-08-01

In order to develop the application of the micro-milling technology, and to fabricate ultra-precision optical surface with complex microstructure, in this paper, the primary experimental research on micro-milling complex microstructure array is carried out. A complex microstructure array surface with vary parameters is designed, and the mathematic model of the surface is set up and simulated. For the fabrication of the designed microstructure array surface, a micro three-axis ultra-precision milling machine tool is developed, aerostatic guideway drove directly by linear motor is adopted in order to guarantee the enough stiffness of the machine, and novel numerical control strategy with linear encoders of 5nm resolution used as the feedback of the control system is employed to ensure the extremely high motion control accuracy. With the help of CAD/CAM technology, convex micro lens array on convex spherical surface with different scales on material of polyvinyl chloride (PVC) and pure copper is fabricated using micro tungsten carbide ball end milling tool based on the ultra-precision micro-milling machine. Excellent nanometer-level micro-movement performance of the axis is proved by motion control experiment. The fabrication is nearly as the same as the design, the characteristic scale of the microstructure is less than 200μm and the accuracy is better than 1μm. It prove that ultra-precision micro-milling technology based on micro ultra-precision machine tool is a suitable and optional method for micro manufacture of microstructure array surface on different kinds of materials, and with the development of micro milling cutter, ultraprecision micro-milling complex microstructure surface will be achieved in future.

Fabrication of two-dimensional periodic structures on silicon after scanning irradiation with femtosecond laser multi-beams

NASA Astrophysics Data System (ADS)

Pan, An; Si, Jinhai; Chen, Tao; Li, Cunxia; Hou, Xun

2016-04-01

Two-dimensional (2D) periodic structures were fabricated on silicon surfaces by femtosecond laser irradiation in air and water, with the assistance of a microlens array (MLA) placed in the beam's path. By scanning the laser beam along the silicon surface, multiple grooves were simultaneously fabricated in parallel along with smaller laser-induced ripples. The 2D periodic structures contained long-periodic grooves and perpendicular short-periodic laser-induced ripples, which had periods of several microns and several hundred nanometers, respectively. We investigated the influence of laser power and scanning velocity on the morphological evolution of the 2D periodic structures in air and water. Large-area grid-like structures with ripples were fabricated by successively scanning once along each direction of the silicon's surface, which showed enhanced optical absorption. Hydrofluoric acid was then used to remove any oxygen and laser-induced defects for all-silicon structures.

Fabrication of large diffractive optical elements in thick film on a concave lens surface.

PubMed

Xie, Yongjun; Lu, Zhenwu; Li, Fengyou

2003-05-05

We demonstrate experimentally the technique of fabricating large diffractive optical elements (DOEs) in thick film on a concave lens surface (mirrors) with precise alignment by using the strategy of double exposure. We adopt the method of double exposure to overcome the difficulty of processing thick photoresist on a large curved substrate. A uniform thick film with arbitrary thickness on a concave lens can be obtained with this technique. We fabricate a large concentric circular grating with a 10-ìm period on a concave lens surface in film with a thickness of 2.0 ìm after development. It is believed that this technique can also be used to fabricate larger DOEs in thicker film on the concave or convex lens surface with precise alignment. There are other potential applications of this technique, such as fabrication of micro-optoelectromechanical systems (MOEMS) or microelectromechanical systems (MEMS) and fabrication of microlens arrays on a large concave lens surface or convex lens surface with precise alignment.

Fabrication of embedded microball lens in PMMA with high repetition rate femtosecond fiber laser.

PubMed

Zheng, Chong; Hu, Anming; Li, Ruozhou; Bridges, Denzel; Chen, Tao

2015-06-29

Embedded microball lenses with superior optical properties function as convex microball lens (VMBL) and concave microball lens (CMBL) were fabricated inside a PMMA substrate with a high repetition rate femtosecond fiber laser. The VMBL was created by femtosecond laser-induced refractive index change, while the CMBL was fabricated due to the heat accumulation effect of the successive laser pulses irradiation at a high repetition rate. The processing window for both types of the lenses was studied and optimized, and the optical properties were also tested by imaging a remote object with an inverted microscope. In order to obtain the microball lenses with adjustable focal lengths and suppressed optical aberration, a shape control method was thus proposed and examined with experiments and ZEMAX® simulations. Applying the optimized fabrication conditions, two types of the embedded microball lenses arrays were fabricated and then tested with imaging experiments. This technology allows the direct fabrication of microlens inside transparent bulk polymer material which has great application potential in multi-function integrated microfluidic devices.

Simulation design of light field imaging based on ZEMAX

NASA Astrophysics Data System (ADS)

Zhou, Ke; Xiao, Xiangguo; Luan, Yadong; Zhou, Xiaobin

2017-02-01

Based on the principium of light field imaging, there designed a objective lens and a microlens array for gathering the light field feature, the homologous ZEMAX models was also be built. Then all the parameters were optimized using ZEMAX and the simulation image was given out. It pointed out that the position relationship between the objective lens and the microlens array had a great affect on imaging, which was the guidance when developing a prototype.

Microlens array processor with programmable weight mask and direct optical input

NASA Astrophysics Data System (ADS)

Schmid, Volker R.; Lueder, Ernst H.; Bader, Gerhard; Maier, Gert; Siegordner, Jochen

1999-03-01

We present an optical feature extraction system with a microlens array processor. The system is suitable for online implementation of a variety of transforms such as the Walsh transform and DCT. Operating with incoherent light, our processor accepts direct optical input. Employing a sandwich- like architecture, we obtain a very compact design of the optical system. The key elements of the microlens array processor are a square array of 15 X 15 spherical microlenses on acrylic substrate and a spatial light modulator as transmissive mask. The light distribution behind the mask is imaged onto the pixels of a customized a-Si image sensor with adjustable gain. We obtain one output sample for each microlens image and its corresponding weight mask area as summation of the transmitted intensity within one sensor pixel. The resulting architecture is very compact and robust like a conventional camera lens while incorporating a high degree of parallelism. We successfully demonstrate a Walsh transform into the spatial frequency domain as well as the implementation of a discrete cosine transform with digitized gray values. We provide results showing the transformation performance for both synthetic image patterns and images of natural texture samples. The extracted frequency features are suitable for neural classification of the input image. Other transforms and correlations can be implemented in real-time allowing adaptive optical signal processing.

Analysis and Numerical Simulation of EWOD of a Droplet for Application in a Variable Focus Microlens

NASA Astrophysics Data System (ADS)

Chang, Yuan-Jen; Mohseni, Kamran; Bright, Victor

2006-11-01

Modification of the curvature of the interface between a conductive (water) and isolating (oil) liquids is used in order to design a tunable microlens. Electrowetting on Dielectric (EWOD), the modification of surface energy of a conductive droplet on an isolated electrode, is employed in order to change the interface curvature and tune the microlens. Several features of the microlens design are addressed. These includes: the drop-centering mechanism, matching of the density of the two immiscible liquids, refractive indexes of the two liquids, and planar electrodes for electrowetting. A dimensional analysis is performed to identify the relevant nondimensional parameters. Direct numerical simulation of the hydrodynamic and electric fields is carried out. It is found that the focal length of the microlens changes continuously from negative to positive by applying a voltage from 0 to 200 volts. The focusing speed of the microlens is calculated to be around 10 milli-seconds. A successfully fabricated microlens device has been demonstrated.

Liquid micro-lens array activated by selective electrowetting on lithium niobate substrates.

PubMed

Grilli, S; Miccio, L; Vespini, V; Finizio, A; De Nicola, S; Ferraro, Pietro

2008-05-26

Lens effect was obtained in an open microfluidic system by using a thin layer of liquid on a polar electric crystal like LiNbO3. An array of liquid micro-lenses was generated by electrowetting effect in pyroelectric periodically poled crystals. Compared to conventional electrowetting devices, the pyroelectric effect allowed to have an electrode-less and circuit-less configuration. An interferometric technique was used to characterize the curvature of the micro-lenses and the corresponding results are presented and discussed. The preliminary results concerning the imaging capability of the micro-lens array are also reported.

Planar microlens with front-face angle: design, fabrication, and characterization

NASA Astrophysics Data System (ADS)

Al Hafiz, Md. Abdullah; Michael, Aron; Kwok, Chee-Yee

2016-07-01

This paper studies the effect of microlens front-face angle on the performance of an optical system consisting of a planar-graded refractive index (GRIN) lens pair facing each other separated by a free-space region. The planar silica microlens pairs are designed to facilitate low-loss optical signal propagation in the free-space region between the opposing optical waveguides. The planar lens is fabricated from a 38-μm-thick fluorine-doped silica layer on a silicon substrate. It has a parabolic refractive index profile in the vertical direction, which is achieved by controlled fluorine incorporation in the silica film to collimate the optical beam in the vertical direction. Horizontal beam collimation is achieved by incorporating a horizontal curvature at the front face of the lens defined by deep oxide etch. A generalized 3×3 ABCDGH transformation matrix method has been derived to compute the coupling efficiency of such microlens pairs to take front-face angles that may be present due to fabrication variations or limitations and possible input/output optical fiber offset/tilt into considerations. Pairs of such planar GRIN lens with various free-space propagation distances between them ranging from 75 to 2500 μm and with front-face angles of 1.5 deg, 2 deg, and 4 deg have been fabricated and characterized. Beam propagation method simulations have been carried out to substantiate the theoretical and experimental results. The results indicate that the optical loss is reasonably low up to 1.5 deg of front-face angles and increases significantly with further increase in the front-face angle. Analysis shows that for a given system with specific microlens front-face angle, the optical loss can be significantly reduced by properly compensating the vertical position of the input and output fibers.

Experimental implementation of fiber optic bundle array wide FOV free space optical communications receiver.

PubMed

Brown, Andrea M; Hahn, Daniel V; Brown, David M; Rolander, Nathan W; Bair, Chun-Huei; Sluz, Joseph E

2012-06-20

A gimbal-free wide field-of-regard (FOR) optical receiver has been built in a laboratory setting for proof-of-concept testing. Multiple datasets are presented that examine the overall FOR of the system and the receiver's ability to track and collect a signal from a moving source. The design is not intended to compete with traditional free space optical communication systems, but rather offer an alternative design that minimizes the number and complexity of mechanical components required at the surface of a small mobile platform. The receiver is composed of a micro-lens array and hexagonal bundles of large core optical fibers that route the optical signal to remote detectors and electronics. Each fiber in the bundle collects power from a distinct solid angle of space and a piezo-electric transducer is used to translate the micro-lens array and optimize coupling into a given fiber core in the bundle. The micro-lens to fiber bundle design is scalable, modular, and can be replicated in an array to increase aperture size.

Switchable focus using a polymeric lenticular microlens array and a polarization rotator.

PubMed

Ren, Hongwen; Xu, Su; Liu, Yifan; Wu, Shin-Tson

2013-04-08

We demonstrate a flat polymeric lenticular microlens array using a mixture of rod-like diacrylate monomer and positive dielectric anisotropy nematic liquid crystal (LC). To create gradient refractive index profile in one microlens, we generate fringing fields from a planar top electrode and two striped bottom electrodes. After UV stabilization, the film is optically anisotropic and can stand alone. We then laminate this film on a 90° twisted-nematic LC cell, which works as a dynamic polarization rotator. The static polymeric lenticular lens exhibits focusing effect only to the extraordinary ray, but no optical effect to the ordinary ray. Such an integrated lens system offers several advantages, such as low voltage, fast response time, and temperature insensitivity, and can be used for switchable 2D/3D displays.

Optical Manipulation of Symbiotic Chlorella in Paramecium Bursaria Using a Fiber Axicon Microlens

NASA Astrophysics Data System (ADS)

Taguchi, K.; Hirota, S.; Nakayama, H.; Kunugihara, D.; Mihara, Y.

2012-03-01

In this paper, chemically etched axicon fiber was proposed for laser trapping of symbiotic chlorella from paramecium bursaria. We fabricated axicon micro lenses on a single-mode bare optical fiber by selective chemical etching technique. The laser beam from fiber axicon microlens was strongly focused and optical forces were sufficient to move a symbiotic chlorella. From experimental results, it was found that our proposed fiber axicon microlens was a promising tool for cell trapping without physical contact.

Design of optical element combining Fresnel lens with microlens array for uniform light-emitting diode lighting.

PubMed

Wang, Guangzhen; Wang, Lili; Li, Fuli; Kong, Depeng

2012-09-01

One kind of optical element combining Fresnel lens with microlens array is designed simply for LED lighting based on geometrical optics and nonimaging optics. This design method imposes no restriction on the source intensity pattern. The designed element has compact construction and can produce multiple shapes of illumination distribution. Taking square lighting as an example, tolerance analysis is carried out to determine tolerance limits for applying the element in the assembly process. This element can produce on-axis lighting and off-axis lighting.

Spatial Control of Photoemitted Electron Beams using a Micro-Lens-Array Transverse-Shaping Technique

DOE Office of Scientific and Technical Information (OSTI.GOV)

Halavanau, A.; Qiang, G.; Ha, G.

2017-07-24

A common issue encountered in photoemission electron sources used in electron accelerators is the transverse inhomogeneity of the laser distribution resulting from the laser-amplification process and often use of frequency up conversion in nonlinear crystals. A inhomogeneous laser distribution on the photocathode produces charged beams with lower beam quality. In this paper, we explore the possible use of microlens arrays (fly-eye light condensers) to dramatically improve the transverse uniformity of the drive laser pulse on UV photocathodes. We also demonstrate the use of such microlens arrays to generate transversely-modulated electron beams and present a possible application to diagnose the propertiesmore » of a magnetized beam.« less

Rapid localized heating of graphene coating on a silicon mold by induction for precision molding of polymer optics.

PubMed

Zhang, Lin; Zhou, Wenchen; Yi, Allen Y

2017-04-01

In compression molding of polymer optical components with micro/nanoscale surface features, rapid heating of the mold surface is critical for the implementation of this technology for large-scale applications. In this Letter, a novel method of a localized rapid heating process is reported. This process is based on induction heating of a thin conductive coating deposited on a silicon mold. Since the graphene coating is very thin (∼45  nm), a high heating rate of 10∼20°C/s can be achieved by employing a 1200 W 30 kHz electrical power unit. Under this condition, the graphene-coated surface and the polymer substrate can be heated above the polymer's glass transition temperature within 30 s and subsequently cooled down to room temperature within several tens of seconds after molding, resulting in an overall thermal cycle of about 3 min or shorter. The feasibility of this process was validated by fabrication of optical gratings, micropillar matrices, and microlens arrays on polymethylmethacrylate (PMMA) substrates with very high precision. The uniformity and surface geometries of the replicated optical elements are evaluated using an optical profilometer, a diffraction test setup, and a Shack-Hartmann wavefront sensor built with a molded PMMA microlens array. Compared with the conventional bulk heating molding process, this novel rapid localized induction heating process could improve replication efficiency with better geometrical fidelity.

Rapid fabrication of a micro-ball lens array by extrusion for optical fiber applications.

PubMed

Shen, S C; Huang, J C

2009-07-20

Batch-fabrication of a micro-ball lens array (MBA) could not only reduce micro assembly costs but also replace conventional ball lenses or costly GRINs (Gradient Refractive Index) without compromising performance. Compared with conventional half-spherical micro-lenses, the MBA is a spherical micro-lens that can focus light in all directions, thus providing the flexibility required for optical applications. Current MBAs are made of SU-8 photoresist by an extrusion process rather than the traditional thermal reflow process. The aim of this study was to develop a new process for MBA batch-fabrication, performed at ambient temperature, by spin-coating SU-8 onto a silicon-wafer surface, which serves as an extrusion plate, and extruding it through a nozzle to form an MBA. The nozzle consists of a nozzle orifice and nozzle cavity, the former being defined and made from SU-8 photoresist using ultra-violet (UV) lithography, which results in good mechanical properties. In this paper, the fabrication of 4 x 4 MBAs with diameters ranging from 60 to 550 um is described. Optical measurements indicated a diameter variance within 3% and a maximum coupling efficiency of approximately 62% when the single mode fiber (SMF) was placed at a distance of 10 um from the MBA. The results of this study proved that MBA fabrication by the extrusion process can enhance the coupling efficiency.

Multi-focused microlens array optimization and light field imaging study based on Monte Carlo method.

PubMed

Li, Tian-Jiao; Li, Sai; Yuan, Yuan; Liu, Yu-Dong; Xu, Chuan-Long; Shuai, Yong; Tan, He-Ping

2017-04-03

Plenoptic cameras are used for capturing flames in studies of high-temperature phenomena. However, simulations of plenoptic camera models can be used prior to the experiment improve experimental efficiency and reduce cost. In this work, microlens arrays, which are based on the established light field camera model, are optimized into a hexagonal structure with three types of microlenses. With this improved plenoptic camera model, light field imaging of static objects and flame are simulated using the calibrated parameters of the Raytrix camera (R29). The optimized models improve the image resolution, imaging screen utilization, and shooting range of depth of field.

Generation of Homogeneous and Patterned Electron Beams using a Microlens Array Laser-Shaping Technique

DOE Office of Scientific and Technical Information (OSTI.GOV)

Halavanau, Aliaksei; Edstrom, Dean; Gai, Wei

2016-06-01

In photocathodes the achievable electron-beam parameters are controlled by the laser used to trigger the photoemission process. Non-ideal laser distribution hampers the final beam quality. Laser inhomogeneities, for instance, can be "amplified" by space-charge force and result in fragmented electron beams. To overcome this limitation laser shaping methods are routinely employed. In the present paper we demonstrate the use of simple microlens arrays to dramatically improve the transverse uniformity. We also show that this arrangement can be used to produce transversely-patterned electron beams. Our experiments are carried out at the Argonne Wakefield Accelerator facility.

Free-form machining for micro-imaging systems

NASA Astrophysics Data System (ADS)

Barkman, Michael L.; Dutterer, Brian S.; Davies, Matthew A.; Suleski, Thomas J.

2008-02-01

While mechanical ruling and single point diamond turning has been a mainstay of optical fabrication for many years, many types of micro-optical devices and structures are not conducive to simple diamond turning or ruling, such as, for example, microlens arrays, and optical surfaces with non-radial symmetry. More recent developments in machining technology have enabled significant expansion of fabrication capabilities. Modern machine tools can generate complex three-dimensional structures with optical quality surface finish, and fabricate structures across a dynamic range of dimensions not achievable with lithographic techniques. In particular, five-axis free-form micromachining offers a great deal of promise for realization of essentially arbitrary surface structures, including surfaces not realizable through binary or analog lithographic techniques. Furthermore, these machines can generate geometric features with optical finish on scales ranging from centimeters to micrometers with accuracies of 10s of nanometers. In this paper, we discuss techniques and applications of free-form surface machining of micro-optical elements. Aspects of diamond machine tool design to realize desired surface geometries in specific materials are discussed. Examples are presented, including fabrication of aspheric lens arrays in germanium for compact infrared imaging systems. Using special custom kinematic mounting equipment and the additional axes of the machine, the lenses were turned with surface finish better than 2 nm RMS and center to center positioning accuracy of +/-0.5 μm.

Direct-writing lithography using laser diode beam focused with single elliptical microlens

NASA Astrophysics Data System (ADS)

Hasan, Md. Nazmul; Haque, Muttahid-Ull; Trisno, Jonathan; Lee, Yung-Chun

2015-10-01

A lithography method is proposed for arbitrary patterning using an elliptically diverging laser diode beam focused with a single planoconvex elliptical microlens. Simulations are performed to model the propagation properties of the laser beam and to design the elliptical microlens, which has two different profiles in the x- and y-axis directions. The microlens is fabricated using an excimer laser dragging method and is then attached to the laser diode using double-sided optically cleared adhesive (OCA) tape. Notably, the use of OCA tape removes the need for a complicated alignment procedure and thus significantly reduces the assembly cost. The minimum focused spot of the laser diode beam is investigated by performing single-shot exposure tests on a photoresist (PR) layer. Finally, the practical feasibility of this lithography technique to generate an arbitrary pattern is demonstrated by dotted and continuous features through thin chromium layer deposition on PR and a metal lift-off process. The results show that the minimum feature size for the dotted patterns is around 6.23 μm, while the minimum linewidths for continuous patterns is 6.44 μm. In other words, the proposed focusing technique has significant potential for writing any arbitrary high-resolution pattern for applications like printed circuit board fabrication.

Reconstruction of refocusing and all-in-focus images based on forward simulation model of plenoptic camera

NASA Astrophysics Data System (ADS)

Zhang, Rumin; Liu, Peng; Liu, Dijun; Su, Guobin

2015-12-01

In this paper, we establish a forward simulation model of plenoptic camera which is implemented by inserting a micro-lens array in a conventional camera. The simulation model is used to emulate how the space objects at different depths are imaged by the main lens then remapped by the micro-lens and finally captured on the 2D sensor. We can easily modify the parameters of the simulation model such as the focal lengths and diameters of the main lens and micro-lens and the number of micro-lens. Employing the spatial integration, the refocused images and all-in-focus images are rendered based on the plenoptic images produced by the model. The forward simulation model can be used to determine the trade-offs between different configurations and to test any new researches related to plenoptic camera without the need of prototype.

Dual-mode photosensitive arrays based on the integration of liquid crystal microlenses and CMOS sensors for obtaining the intensity images and wavefronts of objects.

PubMed

Tong, Qing; Lei, Yu; Xin, Zhaowei; Zhang, Xinyu; Sang, Hongshi; Xie, Changsheng

2016-02-08

In this paper, we present a kind of dual-mode photosensitive arrays (DMPAs) constructed by hybrid integration a liquid crystal microlens array (LCMLA) driven electrically and a CMOS sensor array, which can be used to measure both the conventional intensity images and corresponding wavefronts of objects. We utilize liquid crystal materials to shape the microlens array with the electrically tunable focal length. Through switching the voltage signal on and off, the wavefronts and the intensity images can be acquired through the DMPAs, sequentially. We use white light to obtain the object's wavefronts for avoiding losing important wavefront information. We separate the white light wavefronts with a large number of spectral components and then experimentally compare them with single spectral wavefronts of typical red, green and blue lasers, respectively. Then we mix the red, green and blue wavefronts to a composite wavefront containing more optical information of the object.

Direct single-layered fabrication of 3D concavo convex patterns in nano-stereolithography

NASA Astrophysics Data System (ADS)

Lim, T. W.; Park, S. H.; Yang, D. Y.; Kong, H. J.; Lee, K. S.

2006-09-01

A nano-surfacing process (NSP) is proposed to directly fabricate three-dimensional (3D) concavo convex-shaped microstructures such as micro-lens arrays using two-photon polymerization (TPP), a promising technique for fabricating arbitrary 3D highly functional micro-devices. In TPP, commonly utilized methods for fabricating complex 3D microstructures to date are based on a layer-by-layer accumulating technique employing two-dimensional sliced data derived from 3D computer-aided design data. As such, this approach requires much time and effort for precise fabrication. In this work, a novel single-layer exposure method is proposed in order to improve the fabricating efficiency for 3D concavo convex-shaped microstructures. In the NSP, 3D microstructures are divided into 13 sub-regions horizontally with consideration of the heights. Those sub-regions are then expressed as 13 characteristic colors, after which a multi-voxel matrix (MVM) is composed with the characteristic colors. Voxels with various heights and diameters are generated to construct 3D structures using a MVM scanning method. Some 3D concavo convex-shaped microstructures were fabricated to estimate the usefulness of the NSP, and the results show that it readily enables the fabrication of single-layered 3D microstructures.

Chalcogenide molded freeform optics for mid-infrared lasers

NASA Astrophysics Data System (ADS)

Chenard, Francois; Alvarez, Oseas; Yi, Allen

2017-05-01

High-precision chalcogenide molded micro-lenses were produced to collimate mid-infrared Quantum Cascade Lasers (QCLs). Molded cylindrical micro-lens prototypes with aspheric contour (acylindrical), high numerical aperture (NA 0.8) and small focal length (f<2 mm) were fabricated to collimate the QCL fast-axis beam. Another innovative freeform micro-lens has an input acylindrical surface to collimate the fast axis and an orthogonal output acylindrical surface to collimate the slow axis. The thickness of the freeform lens is such that the output fast- and slow-axis beams are circular. This paper presents results on the chalcogenide molded freeform micro-lens designed to collimate and circularize QCL at 4.6 microns.

SEM contour based metrology for microlens process studies in CMOS image sensor technologies

NASA Astrophysics Data System (ADS)

Lakcher, Amine; Ostrovsky, Alain; Le-Gratiet, Bertrand; Berthier, Ludovic; Bidault, Laurent; Ducoté, Julien; Jamin-Mornet, Clémence; Mortini, Etienne; Besacier, Maxime

2018-03-01

From the first digital cameras which appeared during the 70s to cameras of current smartphones, image sensors have undergone significant technological development in the last decades. The development of CMOS image sensor technologies in the 90s has been the main driver of the recent progresses. The main component of an image sensor is the pixel. A pixel contains a photodiode connected to transistors but only the photodiode area is light sensitive. This results in a significant loss of efficiency. To solve this issue, microlenses are used to focus the incident light on the photodiode. A microlens array is made out of a transparent material and has a spherical cap shape. To obtain this spherical shape, a lithography process is performed to generate resist blocks which are then annealed above their glass transition temperature (reflow). Even if the dimensions to consider are higher than in advanced IC nodes, microlenses are sensitive to process variability during lithography and reflow. A good control of the microlens dimensions is key to optimize the process and thus the performance of the final product. The purpose of this paper is to apply SEM contour metrology [1, 2, 3, 4] to microlenses in order to develop a relevant monitoring methodology and to propose new metrics to engineers to evaluate their process or optimize the design of the microlens arrays.

Replication fidelity improvement of PMMA microlens array based on weight evaluation and optimization

NASA Astrophysics Data System (ADS)

Jiang, Bing-yan; Shen, Long-jiang; Peng, Hua-jiang; Yin, Xiang-lin

2007-12-01

High replication fidelity is a prerequisite of high quality plastic microlens array in injection molding. But, there's not an economical and practical method to evaluate and improve the replication fidelity until now. Based on part weight evaluation and optimization, this paper presents a new method of replication fidelity improvement. Firstly, a simplified analysis model of PMMA micro columns arrays (5×16) with 200μm diameter was set up. And then, Flow (3D) module of Moldflow MPI6.0 based on Navier-Stokes equations was used to calculate the weight of the micro columns arrays in injection molding. The effects of processing parameters (melt temperature, mold temperature, injection time, packing pressure and packing time) on the part weight were investigated in the simulations. The simulation results showed that the mold temperature and the injection time have important effects on the filling of micro columns; the optimal mold temperature and injection time for better replication fidelity could be determined by the curves of mold temperature vs part weight and injection time vs part weight. At last, the effects of processing parameters on part weight of micro columns array were studied experimentally. The experimental results showed that the increase of melt temperature and mold temperature can make the packing pressure transfer to micro cavity more effectively through runner system, and increase the part weight. From the observation results of the image measuring apparatus, it was discovered that the higher the part weight, the better the filling of the microstructures. In conclusion, part weight can be used to evaluate the replication fidelity of micro-feature structured parts primarily; which is an economical and practical method to improve the replication fidelity of microlens arrays based on weight evaluation and optimization.

Dynamic response of a lenticular microlens array using a polyvinyl chloride gel

NASA Astrophysics Data System (ADS)

Li, Xiaolong; Zhou, Zuowei; Ren, Hongwen

2017-12-01

We prepared a lenticular microlens array (LMA) using a polyvinyl chloride (PVC) gel and an interdigitated electrode. By applying a DC voltage to the electrode, the surface of the PVC gel can be waved with an LMA character. When the voltage is removed, the wavy PVC gel can recover its flat surface gradually. With the aid of a polarity-inverted voltage, the recovering time can be largely reduced. The LMA can present a stable dynamic response when it is repetitively impacted by a pulse voltage. The experimental results are given, and the mechanism of reducing the dynamic response time is explained. Our LMA with improved response time has potential applications in sensing, beam steering, biometrics, and displays.

Augmented reality 3D display based on integral imaging

NASA Astrophysics Data System (ADS)

Deng, Huan; Zhang, Han-Le; He, Min-Yang; Wang, Qiong-Hua

2017-02-01

Integral imaging (II) is a good candidate for augmented reality (AR) display, since it provides various physiological depth cues so that viewers can freely change the accommodation and convergence between the virtual three-dimensional (3D) images and the real-world scene without feeling any visual discomfort. We propose two AR 3D display systems based on the theory of II. In the first AR system, a micro II display unit reconstructs a micro 3D image, and the mciro-3D image is magnified by a convex lens. The lateral and depth distortions of the magnified 3D image are analyzed and resolved by the pitch scaling and depth scaling. The magnified 3D image and real 3D scene are overlapped by using a half-mirror to realize AR 3D display. The second AR system uses a micro-lens array holographic optical element (HOE) as an image combiner. The HOE is a volume holographic grating which functions as a micro-lens array for the Bragg-matched light, and as a transparent glass for Bragg mismatched light. A reference beam can reproduce a virtual 3D image from one side and a reference beam with conjugated phase can reproduce the second 3D image from other side of the micro-lens array HOE, which presents double-sided 3D display feature.

Three dimensional measurement with an electrically tunable focused plenoptic camera

NASA Astrophysics Data System (ADS)

Lei, Yu; Tong, Qing; Xin, Zhaowei; Wei, Dong; Zhang, Xinyu; Liao, Jing; Wang, Haiwei; Xie, Changsheng

2017-03-01

A liquid crystal microlens array (LCMLA) with an arrayed microhole pattern electrode based on nematic liquid crystal materials using a fabrication method including traditional UV-photolithography and wet etching is presented. Its focusing performance is measured under different voltage signals applied between the electrodes of the LCMLA. The experimental outcome shows that the focal length of the LCMLA can be tuned easily by only changing the root mean square value of the voltage signal applied. The developed LCMLA is further integrated with a main lens and an imaging sensor to construct a LCMLA-based focused plenoptic camera (LCFPC) prototype. The focused range of the LCFPC can be shifted electrically along the optical axis of the imaging system. The principles and methods for acquiring several key parameters such as three dimensional (3D) depth, positioning, and motion expression are given. The depth resolution is discussed in detail. Experiments are carried out to obtain the static and dynamic 3D information of objects chosen.

Three dimensional measurement with an electrically tunable focused plenoptic camera.

PubMed

Lei, Yu; Tong, Qing; Xin, Zhaowei; Wei, Dong; Zhang, Xinyu; Liao, Jing; Wang, Haiwei; Xie, Changsheng

2017-03-01

A liquid crystal microlens array (LCMLA) with an arrayed microhole pattern electrode based on nematic liquid crystal materials using a fabrication method including traditional UV-photolithography and wet etching is presented. Its focusing performance is measured under different voltage signals applied between the electrodes of the LCMLA. The experimental outcome shows that the focal length of the LCMLA can be tuned easily by only changing the root mean square value of the voltage signal applied. The developed LCMLA is further integrated with a main lens and an imaging sensor to construct a LCMLA-based focused plenoptic camera (LCFPC) prototype. The focused range of the LCFPC can be shifted electrically along the optical axis of the imaging system. The principles and methods for acquiring several key parameters such as three dimensional (3D) depth, positioning, and motion expression are given. The depth resolution is discussed in detail. Experiments are carried out to obtain the static and dynamic 3D information of objects chosen.

Improvement in the light sensitivity of the ultrahigh-speed high-sensitivity CCD with a microlens array

NASA Astrophysics Data System (ADS)

Hayashida, T.,; Yonai, J.; Kitamura, K.; Arai, T.; Kurita, T.; Tanioka, K.; Maruyama, H.; Etoh, T. Goji; Kitagawa, S.; Hatade, K.; Yamaguchi, T.; Takeuchi, H.; Iida, K.

2008-02-01

We are advancing the development of ultrahigh-speed, high-sensitivity CCDs for broadcast use that are capable of capturing smooth slow-motion videos in vivid colors even where lighting is limited, such as at professional baseball games played at night. We have already developed a 300,000 pixel, ultrahigh-speed CCD, and a single CCD color camera that has been used for sports broadcasts and science programs using this CCD. However, there are cases where even higher sensitivity is required, such as when using a telephoto lens during a baseball broadcast or a high-magnification microscope during science programs. This paper provides a summary of our experimental development aimed at further increasing the sensitivity of CCDs using the light-collecting effects of a microlens array.

A microlens-array based pupil slicer and double scrambler for MAROON-X

NASA Astrophysics Data System (ADS)

Seifahrt, Andreas; Stürmer, Julian; Bean, Jacob L.

2016-07-01

We report on the design and construction of a microlens-array (MLA)-based pupil slicer and double scrambler for MAROON-X, a new fiber-fed, red-optical, high-precision radial-velocity spectrograph for one of the twin 6.5m Magellan Telescopes in Chile. We have constructed a 3X slicer based on a single cylindrical MLA and show that geometric efficiencies of >=85% can be achieved, limited by the fill factor and optical surface quality of the MLA. We present here the final design of the 3x pupil slicer and double scrambler for MAROON-X, based on a dual MLA design with (a)spherical lenslets. We also discuss the techniques used to create a pseudo-slit of rectangular core fibers with low FRD levels.

Laser Surface Microstructuring of Biocompatible Materials Using a Microlens Array and the Talbot Effect: Evaluation of the Cell Adhesion.

PubMed

Aymerich, María; Nieto, Daniel; Álvarez, Ezequiel; Flores-Arias, María T

2017-02-22

A laser based technique for microstructuring titanium and tantalum substrates using the Talbot effect and an array of microlenses is presented. By using this hybrid technique; we are able to generate different patterns and geometries on the top surfaces of the biomaterials. The Talbot effect allows us to rapidly make microstructuring, solving the common problems of using microlenses for multipatterning; where the material expelled during the ablation of biomaterials damages the microlens. The Talbot effect permits us to increase the working distance and reduce the period of the patterns. We also demonstrate that the geometries and patterns act as anchor points for cells; affecting the cell adhesion to the metallic substrates and guiding how they spread over the material.

Laser Surface Microstructuring of Biocompatible Materials Using a Microlens Array and the Talbot Effect: Evaluation of the Cell Adhesion

PubMed Central

Aymerich, María; Nieto, Daniel; Álvarez, Ezequiel; Flores-Arias, María T.

2017-01-01

A laser based technique for microstructuring titanium and tantalum substrates using the Talbot effect and an array of microlenses is presented. By using this hybrid technique; we are able to generate different patterns and geometries on the top surfaces of the biomaterials. The Talbot effect allows us to rapidly make microstructuring, solving the common problems of using microlenses for multipatterning; where the material expelled during the ablation of biomaterials damages the microlens. The Talbot effect permits us to increase the working distance and reduce the period of the patterns. We also demonstrate that the geometries and patterns act as anchor points for cells; affecting the cell adhesion to the metallic substrates and guiding how they spread over the material. PMID:28772574

Shack-Hartmann wavefront sensor with large dynamic range by adaptive spot search method.

PubMed

Shinto, Hironobu; Saita, Yusuke; Nomura, Takanori

2016-07-10

A Shack-Hartmann wavefront sensor (SHWFS) that consists of a microlens array and an image sensor has been used to measure the wavefront aberrations of human eyes. However, a conventional SHWFS has finite dynamic range depending on the diameter of the each microlens. The dynamic range cannot be easily expanded without a decrease of the spatial resolution. In this study, an adaptive spot search method to expand the dynamic range of an SHWFS is proposed. In the proposed method, spots are searched with the help of their approximate displacements measured with low spatial resolution and large dynamic range. By the proposed method, a wavefront can be correctly measured even if the spot is beyond the detection area. The adaptive spot search method is realized by using the special microlens array that generates both spots and discriminable patterns. The proposed method enables expanding the dynamic range of an SHWFS with a single shot and short processing time. The performance of the proposed method is compared with that of a conventional SHWFS by optical experiments. Furthermore, the dynamic range of the proposed method is quantitatively evaluated by numerical simulations.

An effective rectification method for lenselet-based plenoptic cameras

NASA Astrophysics Data System (ADS)

Jin, Jing; Cao, Yiwei; Cai, Weijia; Zheng, Wanlu; Zhou, Ping

2016-10-01

The Lenselet-Based Plenoptic has recently drawn a lot of attention in the field of computational photography. The additional information inherent in light field allows a wide range of applications, but some preliminary processing of the raw image is necessary before further operations. In this paper, an effective method is presented for the rotation rectification of the raw image. The rotation is caused by imperfectly position of micro-lens array relative to the sensor plane in commercially available Lytro plenoptic cameras. The key to our method is locating the center of each microlens image, which is projected by a micro-lens. Because of vignetting, the pixel values at centers of the micro-lens image are higher than those at the peripheries. A mask is applied to probe the micro-lens image to locate the center area by finding the local maximum response. The error of the center coordinate estimate is corrected and the angle of rotation is computed via a subsequent line fitting. The algorithm is performed on two images captured by different Lytro cameras. The angles of rotation are -0.3600° and -0.0621° respectively and the rectified raw image is useful and reliable for further operations, such as extraction of the sub-aperture images. The experimental results demonstrate that our method is efficient and accurate.

High operating temperature nBn detector with monolithically integrated microlens

NASA Astrophysics Data System (ADS)

Soibel, Alexander; Keo, Sam A.; Fisher, Anita; Hill, Cory J.; Luong, Edward; Ting, David Z.; Gunapala, Sarath D.; Lubyshev, Dmitri; Qiu, Yueming; Fastenau, Joel M.; Liu, Amy W. K.

2018-01-01

We demonstrate an InAsSb nBn detector monolithically integrated with a microlens fabricated on the back side of the detector. The increase in the optical collection area of the detector resulted in a five-fold enhancement of the responsivity to Rp = 5.5 A/W. The responsivity increases further to Rp = 8.5 A/W with an antireflection coating. These 4.5 μm cut-off wavelength antireflection coated detectors with microlenses exhibited a detectivity of D* (λ) = 2.7 × 1010 cmHz0.5/W at T = 250 K, which can be reached easily with a single-stage thermoelectric cooler or with a passive radiator in the space environment. This represents a 25 K increase in the operating temperature of these devices compared to the uncoated detectors without an integrated microlens.

Calibrating the orientation between a microlens array and a sensor based on projective geometry

NASA Astrophysics Data System (ADS)

Su, Lijuan; Yan, Qiangqiang; Cao, Jun; Yuan, Yan

2016-07-01

We demonstrate a method for calibrating a microlens array (MLA) with a sensor component by building a plenoptic camera with a conventional prime lens. This calibration method includes a geometric model, a setup to adjust the distance (L) between the prime lens and the MLA, a calibration procedure for determining the subimage centers, and an optimization algorithm. The geometric model introduces nine unknown parameters regarding the centers of the microlenses and their images, whereas the distance adjustment setup provides an initial guess for the distance L. The simulation results verify the effectiveness and accuracy of the proposed method. The experimental results demonstrate the calibration process can be performed with a commercial prime lens and the proposed method can be used to quantitatively evaluate whether a MLA and a sensor is assembled properly for plenoptic systems.

Reliable InP-based Geiger-mode avalanche photodiode arrays

NASA Astrophysics Data System (ADS)

Smith, Gary M.; McIntosh, K. Alex; Donnelly, Joseph P.; Funk, Joseph E.; Mahoney, Leonard J.; Verghese, Simon

2009-05-01

Arrays as large as 256 x 64 of single-photon counting avalanche photodiodes have been developed for defense applications in free-space communication and laser radar. Focal plane arrays (FPAs) sensitive to both 1.06 and 1.55 μm wavelength have been fabricated for these applications. At 240 K and 4 V overbias, the dark count rate (DCR) of 15 μm diameter devices is typically 250 Hz for 1.06 μm sensitive APDs and 1 kHz for 1.55 μm APDs. Photon detection efficiencies (PDE) at 4 V overbias are about 45% for both types of APDs. Accounting for microlens losses, the full FPA has a PDE of 30%. The reset time needed for a pixel to avoid afterpulsing at 240 K is about 3-4 μsec. These devices have been used by system groups at Lincoln Laboratory and other defense contractors for building operational systems. For these fielded systems the device reliability is a strong concern. Individual APDs as well as full arrays have been run for over 1000 hrs of accelerated testing to verify their stability. The reliability of these GM-APDs is shown to be under 10 FITs at operating temperatures of 250 K, which also corresponds to an MTTF of 17,100 yrs.

Simulation of electrowetting lens and prism arrays for wavefront compensation.

PubMed

Gopinath, Juliet T; Bright, Victor M; Cogswell, Carol C; Niederriter, Robert D; Watson, Alexander; Zahreddine, Ramzi; Cormack, Robert H

2012-09-20

A novel application of electrowetting devices has been simulated: wavefront correction using an array of electrowetting lenses and prisms. Five waves of distortion can be corrected with Strehl ratios of 0.9 or higher, utilizing piston, tip-tilt, and curvature corrections from arrays of 19 elements and fill factors as low as 40%. Effective control of piston can be achieved by placing the liquid lens array at the focus of two microlens arrays. Seven waves of piston delay can be generated with variation in focal length between 1.5 and 500 mm.

Light beam shaping for collimated emission from white organic light-emitting diodes using customized lenticular microlens arrays structure

NASA Astrophysics Data System (ADS)

Zhou, Lei; Bai, Gui-Lin; Guo, Xin; Shen, Su; Ou, Qing-Dong; Fan, Yuan-Yuan

2018-05-01

We present a design approach to realizing a desired collimated planar incoherent light source (CPILS) by incorporating lenticular microlens arrays (LMLAs) onto the substrates of discrete white organic light-emitting diode (WOLED) light sources and demonstrate the effectiveness of this method in collimated light beam shaping and luminance enhancement simultaneously. The obtained collimated WOLED light source shows enhanced luminance by a factor of 2.7 compared with that of the flat conventional device at the normal polar angle and, more importantly, exhibits a narrowed angular emission with a full-width at half-maximum (FWHM) of ˜33.6°. We anticipate that the presented strategy could provide an alternative way for achieving the desired large scale CPILS, thereby opening the door to many potential applications, including LCD backlights, three-dimensional displays, car headlights, and so forth.

Laser beam shaping design based on micromirror array

NASA Astrophysics Data System (ADS)

Fang, Han; Su, Bida; Liu, Jiaguo; Fan, Xiaoli; Jing, Wang

2017-10-01

In the practical application of the laser, it is necessary to use the laser beam shaping technology to shape the output beam of laser device to the uniform light intensity distribution. The shaping divergent optical system of compound eye integrator way is composed of beam expanding mirror group and lens array. Its working principle is to expand the output laser to a certain size of caliber, and then divide the beam with lens array into multiple sub beam, where the lens unit of lens array can control the divergence angle of sub beam through the design of focal length, with mutual superposition of the sub beam in far field, to make up for the nonuniformity of beam, so that the radiant exitance on the radiated surface may become uniform. In this paper, we use a reflective microlens array to realize the laser beam shaping. By through of the practical optical path model established, the ray tracing is carried out and the simulation results for single-mode Gaussian beam with noise circumstance is provided. The analysis results show that the laser beam shaping under different inputs can be effectively realized by use of microlens array. All the energy is within the signal window, with a high energy efficiency of more than 90%; The measured surface has a better uniformity, and the uniformity is better than 99.5% at 150m.

Demonstration Of Fast, Single-Shot Photocathode QE Mapping Method Using Mla Pattern Beam

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wisniewski, E. E.; Conde, M.; Doran, D. S.

Quantum efficiency (QE) is the chief figure of merit in the characterization of photocathodes. Semiconductor photocathodes, especially when used in high rep-rate photoinjectors, are known to show QE degradation over time and must be replaced. The totalQE is the basic diagnosticwhich is used widely and is easy to obtain. However, a QE map indicating variations of QE across the cathode surface has greater utility. It can quickly diagnose problems of QE inhomogeneity. Most QE mapping techniques require hours to complete and are thus disruptive to a user facility schedule. A fast, single-shot method has been proposed using a micro-lens arraymore » (MLA) generated QE map. In this paper we report the implementation of the method at Argonne Wakefield Accelerator facility. A micro-lens array (MLA) is used to project an array of beamlets onto the photocathode. The resulting photoelectron beam in the form of an array of electron beamlets is imaged at a YAG screen. Four synchronized measurements are made and the results used to produce a QE map of the photocathode.« less

Micro-optical fabrication by ultraprecision diamond machining and precision molding

NASA Astrophysics Data System (ADS)

Li, Hui; Li, Likai; Naples, Neil J.; Roblee, Jeffrey W.; Yi, Allen Y.

2017-06-01

Ultraprecision diamond machining and high volume molding for affordable high precision high performance optical elements are becoming a viable process in optical industry for low cost high quality microoptical component manufacturing. In this process, first high precision microoptical molds are fabricated using ultraprecision single point diamond machining followed by high volume production methods such as compression or injection molding. In the last two decades, there have been steady improvements in ultraprecision machine design and performance, particularly with the introduction of both slow tool and fast tool servo. Today optical molds, including freeform surfaces and microlens arrays, are routinely diamond machined to final finish without post machining polishing. For consumers, compression molding or injection molding provide efficient and high quality optics at extremely low cost. In this paper, first ultraprecision machine design and machining processes such as slow tool and fast too servo are described then both compression molding and injection molding of polymer optics are discussed. To implement precision optical manufacturing by molding, numerical modeling can be included in the future as a critical part of the manufacturing process to ensure high product quality.

24-ch microlens-integrated no-polish connector for optical interconnection with polymer waveguides

NASA Astrophysics Data System (ADS)

Shiraishi, Takashi; Yagisawa, Takatoshi; Ikeuchi, Tadashi; Daikuhara, Osamu; Tanaka, Kazuhiro

2013-02-01

We successfully developed a new 24-ch optical connector for polymer waveguides. The connector consists of a transparent thermoplastic resin that has two rectangular slits on one side for alignment of the waveguide films and integrated microlens arrays on the other side for coupling to the MT connector. Two 12-ch waveguide films were cut to a 3-mm width. The thickness of each waveguide film was controlled at 100 μm. The waveguide films were inserted into the slits until they touched the bottom face of the slit. Ultraviolet curing adhesive was used to achieve a short hardening process. The expanded beam in the transparent material is focused by the microlens arrays formed on the connector surface. This lens structure enables assembly without the need for a polishing process. We designed the lens for coupling between a step-index 40-μm rectangular waveguide and a graded-index 50-μm fiber. We achieved low-loss optical coupling by designing a method of providing asymmetric magnification between the horizontal and vertical directions in order to compensate for the asymmetric numerical aperture of the waveguide. The typical measured coupling losses from/to the waveguide to/from the fiber were 1.2 dB and 0.6 dB, respectively. The total coupling loss was as small as that of a physical contact connection.

Focus tunable device actuator based on ionic polymer metal composite

NASA Astrophysics Data System (ADS)

Zhang, Yi-Wei; Su, Guo-Dung J.

2015-09-01

IPMC (Ionic Polymer Metallic Composite) is a kind of electroactive polymer (EAP) which is used as an actuator because of its low driving voltage and small size. The mechanism of IPMC actuator is due to the ionic diffusion when the voltage gradient is applied. In this paper, the complex IPMC fabrication such as Ag-IPMC be further developed in this paper. The comparison of response time and tip bending displacement of Pt-IPMC and Ag-IPMC will also be presented. We also use the optimized IPMC as the lens actuator integrated with curvilinear microlens array, and use the 3D printer to make a simple module and spring stable system. We also used modeling software, ANSYS Workbench, to confirm the effect of spring system. Finally, we successfully drive the lens system in 200μm stroke under 2.5V driving voltage within 1 seconds, and the resonant frequency is approximately 500 Hz.

Development of a low cost high precision three-layer 3D artificial compound eye.

PubMed

Zhang, Hao; Li, Lei; McCray, David L; Scheiding, Sebastian; Naples, Neil J; Gebhardt, Andreas; Risse, Stefan; Eberhardt, Ramona; Tünnermann, Andreas; Yi, Allen Y

2013-09-23

Artificial compound eyes are typically designed on planar substrates due to the limits of current imaging devices and available manufacturing processes. In this study, a high precision, low cost, three-layer 3D artificial compound eye consisting of a 3D microlens array, a freeform lens array, and a field lens array was constructed to mimic an apposition compound eye on a curved substrate. The freeform microlens array was manufactured on a curved substrate to alter incident light beams and steer their respective images onto a flat image plane. The optical design was performed using ZEMAX. The optical simulation shows that the artificial compound eye can form multiple images with aberrations below 11 μm; adequate for many imaging applications. Both the freeform lens array and the field lens array were manufactured using microinjection molding process to reduce cost. Aluminum mold inserts were diamond machined by the slow tool servo method. The performance of the compound eye was tested using a home-built optical setup. The images captured demonstrate that the proposed structures can successfully steer images from a curved surface onto a planar photoreceptor. Experimental results show that the compound eye in this research has a field of view of 87°. In addition, images formed by multiple channels were found to be evenly distributed on the flat photoreceptor. Additionally, overlapping views of the adjacent channels allow higher resolution images to be re-constructed from multiple 3D images taken simultaneously.

Dual-view-zone tabletop 3D display system based on integral imaging.

PubMed

He, Min-Yang; Zhang, Han-Le; Deng, Huan; Li, Xiao-Wei; Li, Da-Hai; Wang, Qiong-Hua

2018-02-01

In this paper, we propose a dual-view-zone tabletop 3D display system based on integral imaging by using a multiplexed holographic optical element (MHOE) that has the optical properties of two sets of microlens arrays. The MHOE is recorded by a reference beam using the single-exposure method. The reference beam records the wavefronts of a microlens array from two different directions. Thus, when the display beam is projected on the MHOE, two wavefronts with the different directions will be rebuilt and the 3D virtual images can be reconstructed in two viewing zones. The MHOE has angle and wavelength selectivity. Under the conditions of the matched wavelength and the angle of the display beam, the diffraction efficiency of the MHOE is greatest. Because the unmatched light just passes through the MHOE, the MHOE has the advantage of a see-through display. The experimental results confirm the feasibility of the dual-view-zone tabletop 3D display system.

Viewing zones in three-dimensional imaging systems based on lenticular, parallax-barrier, and microlens-array plates.

PubMed

Son, Jung-Young; Saveljev, Vladmir V; Kim, Jae-Soon; Kim, Sung-Sik; Javidi, Bahram

2004-09-10

The viewing zone of autostereoscopic imaging systems that use lenticular, parallax-barrier, and microlens-array plates as the viewing-zone-forming optics is analyzed in order to verify the image-quality differences between different locations of the zone. The viewing zone consists of many subzones. The images seen at most of these subzones are composed of at least one image strip selected from the total number of different view images displayed. These different view images are not mixed but patched to form a complete image. This image patching deteriorates the quality of the image seen at different subzones. We attempt to quantify the quality of the image seen at these viewing subzones by taking the inverse of the number of different view images patched together at different subzones. Although the combined viewing zone can be extended to almost all of the front space of the imaging system, in reality it is limited mainly by the image quality.

Super-resolved all-refocused image with a plenoptic camera

NASA Astrophysics Data System (ADS)

Wang, Xiang; Li, Lin; Hou, Guangqi

2015-12-01

This paper proposes an approach to produce the super-resolution all-refocused images with the plenoptic camera. The plenoptic camera can be produced by putting a micro-lens array between the lens and the sensor in a conventional camera. This kind of camera captures both the angular and spatial information of the scene in one single shot. A sequence of digital refocused images, which are refocused at different depth, can be produced after processing the 4D light field captured by the plenoptic camera. The number of the pixels in the refocused image is the same as that of the micro-lens in the micro-lens array. Limited number of the micro-lens will result in poor low resolution refocused images. Therefore, not enough details will exist in these images. Such lost details, which are often high frequency information, are important for the in-focus part in the refocused image. We decide to super-resolve these in-focus parts. The result of image segmentation method based on random walks, which works on the depth map produced from the 4D light field data, is used to separate the foreground and background in the refocused image. And focusing evaluation function is employed to determine which refocused image owns the clearest foreground part and which one owns the clearest background part. Subsequently, we employ single image super-resolution method based on sparse signal representation to process the focusing parts in these selected refocused images. Eventually, we can obtain the super-resolved all-focus image through merging the focusing background part and the focusing foreground part in the way of digital signal processing. And more spatial details will be kept in these output images. Our method will enhance the resolution of the refocused image, and just the refocused images owning the clearest foreground and background need to be super-resolved.

Activation and control of microlens liquid arrays on functionalized polar electric crystal substrates by electro-wetting effect and temperature

NASA Astrophysics Data System (ADS)

Ferraro, Pietro; Grilli, Simonetta; Miccio, Lisa; Vespini, Veronica; Finizio, Sergio DeNicola Andrea

2008-11-01

In recent years a variety of liquid bases optical elements have been conceived, designed and fabricated even for commercial products like digital cameras o cellular phone cameras. The impressive development of microfluidic systems in conjunction with optics has led to the creation of a completely new Science field of investigation named optofludics. Optofludics, among others topics, deals with investigation and methods for realizing liquid micro-lenses. A variety of liquid micro-lenses have been designed and realized by using different configurations. We demonstrate that a lensing effect can be obtained in an open microfluidic system by using a thin layer of liquid on a polar electric crystal such as Lithium Niobate (LiNbO3). Electrowetting patterning on LiNbO3 surface is obtained by pyroelectric effect consisting in a simple but reliable electrodes-less and circuit-less configuration. The electrodes are intrinsically embedded into the substrate. The material is functionalised by means of a micro-engineering electric filed poling process. Lens array with variable focus has been demonstrated with a large number of lens elements (10x10) on micrometric scale (aperture of single lens 100 microns).

Direct fabrication of silicone lenses with 3D printed parts

NASA Astrophysics Data System (ADS)

Kamal, Tahseen; Watkins, Rachel; Cen, Zijian; Lee, W. M.

2016-11-01

The traditional process of making glass lenses requires grinding and polishing of the material which is a tedious and sensitive process. Existing polymer lens making techniques, such as high temperature reflow techniques, have been significantly simple lens making processes which cater well to customer industry. Recently, the use of UV-curing liquid lens has ushered in customized lens making (Printed Optics), but contains undesirable yellowing effects. Polydimethylsiloxane (PDMS) is a transparent polymer curable at low temperature (<100°C) provides an alternative to lens making. In this work, we showed that PDMS lenses are fabricated using single silicone droplets which are formed in a guided and controlled passive manner using 3D printed tools. These silicone lenses have attributes such as smoothness of curvature, resilience to temperature change, low optical aberrations, high transparency (>95%) and minimal aging (yellowing). Moreover, these lenses have a range of focal lengths (3.5 mm to 14.5 mm as well as magnifications (up to 160X). In addition, we created smartphone attachment to turn smart device (tablet or smartphone) into a low-powered microscope. In future we plan to extend this method to produce microlens array.

Nanometric edge profile measurement of cutting tools on a diamond turning machine

NASA Astrophysics Data System (ADS)

Asai, Takemi; Arai, Yoshikazu; Cui, Yuguo; Gao, Wei

2008-10-01

Single crystal diamond tools are used for fabrication of precision parts [1-5]. Although there are many types of tools that are supplied, the tools with round nose are popular for machining very smooth surfaces. Tools with small nose radii, small wedge angles and included angles are also being utilized for fabrication of micro structured surfaces such as microlens arrays [6], diffractive optical elements and so on. In ultra precision machining, tools are very important as a part of the machining equipment. The roughness or profile of machined surface may become out of desired tolerance. It is thus necessary to know the state of the tool edge accurately. To meet these requirements, an atomic force microscope (AFM) for measuring the 3D edge profiles of tools having nanometer-scale cutting edge radii with high resolution has been developed [7-8]. Although the AFM probe unit is combined with an optical sensor for aligning the measurement probe with the tools edge top to be measured in short time in this system, this time only the AFM probe unit was used. During the measurement time, that was attached onto the ultra precision turning machine to confirm the possibility of profile measurement system.

Liquid-crystal microlenses with patterned ring-electrode arrays for multiple-mode two-dimensional imaging

NASA Astrophysics Data System (ADS)

Xie, Xingwang; Han, Xinjie; Long, Huabao; Dai, Wanwan; Xin, Zhaowei; Wei, Dong; Zhang, Xinyu; Wang, Haiwei; Xie, Changsheng

2018-02-01

In this paper, a new liquid-crystal microlens array (LCMLA) with patterned ring-electrode arrays (PREAs) is investigated, which has an ability to acquire multiple-mode two-dimensional images with better electrically tunable efficiency than common liquid-crystal devices. The new type of LCMLA can be used to overcome several remarkable disadvantage of conventional liquid-crystal microlens arrays switched and adjusted electrically by relatively complex mechanism. There are two layer electrodes in the LCMLA developed by us. The top electrode layer consists of PREAs with different featured diameter but the same center for each single cell, and the bottom is a plate electrode. When both electrode structures are driven independently by variable AC voltage signal, a gradient electric field distribution could be obtained, which can drive liquid-crystal molecules to reorient themselves along the gradient electric field shaped, so as to demonstrate a satisfactory refractive index distribution. The common experiments are carried out to validate the performances needed. As shown, the focal length of the LCMLA can be adjusted continuously according to the variable voltage signal applied. According to designing, the LCMLA will be integrated continuously with an image sensors to set up a camera with desired performances. The test results indicate that our camera based on the LCMLA can obtain distinct multiple-mode two-dimensional images under the condition of using relatively low driving signal voltage.

Using focused plenoptic cameras for rich image capture.

PubMed

Georgiev, T; Lumsdaine, A; Chunev, G

2011-01-01

This approach uses a focused plenoptic camera to capture the plenoptic function's rich "non 3D" structure. It employs two techniques. The first simultaneously captures multiple exposures (or other aspects) based on a microlens array having an interleaved set of different filters. The second places multiple filters at the main lens aperture.

Fiber developments at the Anglo-Australian Observatory for SPIRAL and AUSTRALIS

NASA Astrophysics Data System (ADS)

Lee, David; Taylor, Keith

2000-08-01

In this paper we discuss some of the recent developments with optical fibers at the Anglo-Australian Observatory. Firstly we will describe the upgrade to the SPIRAL integral field spectrograph for the Anglo-Australian Telescope. SPIRAL-B uses a crossed cylindrical microlens array to feed 512 optical fibers at F/5.5 providing a field of view of 22 by 11 arcseconds with 0.7 arcsecond spatial sampling. The performance of the fiber bundle, microlens array, and construction techniques will be described. We will also discus the development of prototype optical fiber switchyard as part of the AUSTRALIS concept study. The switchyard provides an 'optical bread' in the fiber, between the telescope and spectrograph, which allows coupling between fibers of different diameters and focal rations. A dichroic can also be incorporated into the switchyard to allow both optical and IR spectrographs to be fed simultaneously. Switchyards therefore provide much greater observing flexibility by increasing the number of possible instrument configurations. We will briefly discuss the merits of fiber switchyards and present the results of FRD and transmission test performed in the laboratory.

Single-snapshot 2D color measurement by plenoptic imaging system

NASA Astrophysics Data System (ADS)

Masuda, Kensuke; Yamanaka, Yuji; Maruyama, Go; Nagai, Sho; Hirai, Hideaki; Meng, Lingfei; Tosic, Ivana

2014-03-01

Plenoptic cameras enable capture of directional light ray information, thus allowing applications such as digital refocusing, depth estimation, or multiband imaging. One of the most common plenoptic camera architectures contains a microlens array at the conventional image plane and a sensor at the back focal plane of the microlens array. We leverage the multiband imaging (MBI) function of this camera and develop a single-snapshot, single-sensor high color fidelity camera. Our camera is based on a plenoptic system with XYZ filters inserted in the pupil plane of the main lens. To achieve high color measurement precision of this system, we perform an end-to-end optimization of the system model that includes light source information, object information, optical system information, plenoptic image processing and color estimation processing. Optimized system characteristics are exploited to build an XYZ plenoptic colorimetric camera prototype that achieves high color measurement precision. We describe an application of our colorimetric camera to color shading evaluation of display and show that it achieves color accuracy of ΔE<0.01.

Ultra-compact imaging system based on multi-aperture architecture

NASA Astrophysics Data System (ADS)

Meyer, Julia; Brückner, Andreas; Leitel, Robert; Dannberg, Peter; Bräuer, Andreas; Tünnermann, Andreas

2011-03-01

As a matter of course, cameras are integrated in the field of information and communication technology. It can be observed, that there is a trend that those cameras get smaller and at the same time cheaper. Because single aperture have a limit of miniaturization, while simultaneously keeping the same space-bandwidth-product and transmitting a wide field of view, there is a need of new ideas like the multi aperture optical systems. In the proposed camera system the image is formed with many different channels each consisting of four microlenses which are arranged one after another in different microlens arrays. A partial image which fits together with the neighbouring one is formed in every single channel, so that a real erect image is generated and a conventional image sensor can be used. The microoptical fabrication process and the assembly are well established and can be carried out on wafer-level. Laser writing is used for the fabrication of the masks. UV-lithography, a reflow process and UV-molding is needed for the fabrication of the apertures and the lenses. The developed system is very small in terms of both length and lateral dimensions and has a VGA resolution and a diagonal field of view of 65 degrees. This microoptical vision system is appropriate for being implemented in electronic devices such as webcams integrated in notebookdisplays.

Design and performance of single photon APD focal plane arrays for 3-D LADAR imaging

NASA Astrophysics Data System (ADS)

Itzler, Mark A.; Entwistle, Mark; Owens, Mark; Patel, Ketan; Jiang, Xudong; Slomkowski, Krystyna; Rangwala, Sabbir; Zalud, Peter F.; Senko, Tom; Tower, John; Ferraro, Joseph

2010-08-01

×We describe the design, fabrication, and performance of focal plane arrays (FPAs) for use in 3-D LADAR imaging applications requiring single photon sensitivity. These 32 × 32 FPAs provide high-efficiency single photon sensitivity for three-dimensional LADAR imaging applications at 1064 nm. Our GmAPD arrays are designed using a planarpassivated avalanche photodiode device platform with buried p-n junctions that has demonstrated excellent performance uniformity, operational stability, and long-term reliability. The core of the FPA is a chip stack formed by hybridizing the GmAPD photodiode array to a custom CMOS read-out integrated circuit (ROIC) and attaching a precision-aligned GaP microlens array (MLA) to the back-illuminated detector array. Each ROIC pixel includes an active quenching circuit governing Geiger-mode operation of the corresponding avalanche photodiode pixel as well as a pseudo-random counter to capture per-pixel time-of-flight timestamps in each frame. The FPA has been designed to operate at frame rates as high as 186 kHz for 2 μs range gates. Effective single photon detection efficiencies as high as 40% (including all optical transmission and MLA losses) are achieved for dark count rates below 20 kHz. For these planar-geometry diffused-junction GmAPDs, isolation trenches are used to reduce crosstalk due to hot carrier luminescence effects during avalanche events, and we present details of the crosstalk performance for different operating conditions. Direct measurement of temporal probability distribution functions due to cumulative timing uncertainties of the GmAPDs and ROIC circuitry has demonstrated a FWHM timing jitter as low as 265 ps (standard deviation is ~100 ps).

Fabrication of a high-precision spherical micromirror by bending a silicon plate with a metal pad.

PubMed

Wu, Tong; Hane, Kazuhiro

2011-09-20

We demonstrate here the fabrication of a smooth mirror surface by bending a thin silicon plate. A spherical surface is achieved by the bending moment generated in the circumference of the micromirror. Both convex and concave spherical micromirrors are realized through the anodic bonding of silicon and Pyrex glass. Since the mirror surface is originated from the polished silicon surface and no additional etching is introduced for manufacturing, the surface roughness is thus limited to the polishing error. This novel approach opens possibilities for fabricating a smooth surface for micromirror and microlens applications.

Controlled microfluidic interfaces for microsensors

NASA Astrophysics Data System (ADS)

Jiang, H.

2009-02-01

Lab on a chip has found many applications in biological and chemical analysis, including pathogen detections. Because these labs on chips involve handling of fluids at the microscale, surface tension profoundly affects the behavior and performance of these systems. Through careful engineering, controlled liquid-liquid or liquid-gas interfaces at the microscale can be formed and used in many interesting applications. In this talk, I will present our work on applying such interfaces to microsensing. These interfaces are created at hydrophobic-hydrophilic boundaries formed within microfluidic channels and pinned by surface tension. We have designed and fabricated a few microsensing techniques including chemical and biological sensing using dissolvable micromembranes in microchannels, chemical and biological sensing at liquid crystals interfacing either air or aqueous solutions, and collection of gaseous samples and aerosols through air-liquid microfludic interfaces. I will next introduce on-chip microlenses and microlens arrays for optical detection, including smart and adaptive liquid microlenses actuated by stimuli-responsive hydrogels, and liquid microlenses in situ formed within microfluidic channels via pneumatic control of droplets.

Scalable Coding of Plenoptic Images by Using a Sparse Set and Disparities.

PubMed

Li, Yun; Sjostrom, Marten; Olsson, Roger; Jennehag, Ulf

2016-01-01

One of the light field capturing techniques is the focused plenoptic capturing. By placing a microlens array in front of the photosensor, the focused plenoptic cameras capture both spatial and angular information of a scene in each microlens image and across microlens images. The capturing results in a significant amount of redundant information, and the captured image is usually of a large resolution. A coding scheme that removes the redundancy before coding can be of advantage for efficient compression, transmission, and rendering. In this paper, we propose a lossy coding scheme to efficiently represent plenoptic images. The format contains a sparse image set and its associated disparities. The reconstruction is performed by disparity-based interpolation and inpainting, and the reconstructed image is later employed as a prediction reference for the coding of the full plenoptic image. As an outcome of the representation, the proposed scheme inherits a scalable structure with three layers. The results show that plenoptic images are compressed efficiently with over 60 percent bit rate reduction compared with High Efficiency Video Coding intra coding, and with over 20 percent compared with an High Efficiency Video Coding block copying mode.

Fiber optic coupling of a microlens conditioned, stacked semiconductor laser diode array

DOEpatents

Beach, Raymond J.; Benett, William J.; Mills, Steven T.

1997-01-01

The output radiation from the two-dimensional aperture of a semiconductor laser diode array is efficiently coupled into an optical fiber. The two-dimensional aperture is formed by stacking individual laser diode bars on top of another in a "rack and stack" configuration. Coupling into the fiber is then accomplished using individual microlenses to condition the output radiation of the laser diode bars. A lens that matches the divergence properties and wavefront characteristics of the laser light to the fiber optic is used to focus this conditioned radiation into the fiber.

Flexible Near-Field Nanopatterning with Ultrathin, Conformal Phase Masks on Nonplanar Substrates for Biomimetic Hierarchical Photonic Structures.

PubMed

Kwon, Young Woo; Park, Junyong; Kim, Taehoon; Kang, Seok Hee; Kim, Hyowook; Shin, Jonghwa; Jeon, Seokwoo; Hong, Suck Won

2016-04-26

Multilevel hierarchical platforms that combine nano- and microstructures have been intensively explored to mimic superior properties found in nature. However, unless directly replicated from biological samples, desirable multiscale structures have been challenging to efficiently produce to date. Departing from conventional wafer-based technology, new and efficient techniques suitable for fabricating bioinspired structures are highly desired to produce three-dimensional architectures even on nonplanar substrates. Here, we report a facile approach to realize functional nanostructures on uneven microstructured platforms via scalable optical fabrication techniques. The ultrathin form (∼3 μm) of a phase grating composed of poly(vinyl alcohol) makes the material physically flexible and enables full-conformal contact with rough surfaces. The near-field optical effect can be identically generated on highly curved surfaces as a result of superior conformality. Densely packed nanodots with submicron periodicity are uniformly formed on microlens arrays with a radius of curvature that is as low as ∼28 μm. Increasing the size of the gratings causes the production area to be successfully expanded by up to 16 in(2). The "nano-on-micro" structures mimicking real compound eyes are transferred to flexible and stretchable substrates by sequential imprinting, facilitating multifunctional optical films applicable to antireflective diffusers for large-area sheet-illumination displays.

Biologically inspired artificial compound eyes.

PubMed

Jeong, Ki-Hun; Kim, Jaeyoun; Lee, Luke P

2006-04-28

This work presents the fabrication of biologically inspired artificial compound eyes. The artificial ommatidium, like that of an insect's compound eyes, consists of a refractive polymer microlens, a light-guiding polymer cone, and a self-aligned waveguide to collect light with a small angular acceptance. The ommatidia are omnidirectionally arranged along a hemispherical polymer dome such that they provide a wide field of view similar to that of a natural compound eye. The spherical configuration of the microlenses is accomplished by reconfigurable microtemplating, that is, polymer replication using the deformed elastomer membrane with microlens patterns. The formation of polymer waveguides self-aligned with microlenses is also realized by a self-writing process in a photosensitive polymer resin. The angular acceptance is directly measured by three-dimensional optical sectioning with a confocal microscope, and the detailed optical characteristics are studied in comparison with a natural compound eye.

Optimizing laser beam profiles using micro-lens arrays for efficient material processing: applications to solar cells

NASA Astrophysics Data System (ADS)

Hauschild, Dirk; Homburg, Oliver; Mitra, Thomas; Ivanenko, Mikhail; Jarczynski, Manfred; Meinschien, Jens; Bayer, Andreas; Lissotschenko, Vitalij

2009-02-01

High power laser sources are used in various production tools for microelectronic products and solar cells, including the applications annealing, lithography, edge isolation as well as dicing and patterning. Besides the right choice of the laser source suitable high performance optics for generating the appropriate beam profile and intensity distribution are of high importance for the right processing speed, quality and yield. For industrial applications equally important is an adequate understanding of the physics of the light-matter interaction behind the process. In advance simulations of the tool performance can minimize technical and financial risk as well as lead times for prototyping and introduction into series production. LIMO has developed its own software founded on the Maxwell equations taking into account all important physical aspects of the laser based process: the light source, the beam shaping optical system and the light-matter interaction. Based on this knowledge together with a unique free-form micro-lens array production technology and patented micro-optics beam shaping designs a number of novel solar cell production tool sub-systems have been built. The basic functionalities, design principles and performance results are presented with a special emphasis on resilience, cost reduction and process reliability.

Planar waveguide concentrator used with a seasonal tracker.

PubMed

Bouchard, Sébastien; Thibault, Simon

2012-10-01

Solar concentrators offer good promise for reducing the cost of solar power. Planar waveguides equipped with a microlens slab have already been proposed as an excellent approach to produce medium to high concentration levels. Instead, we suggest the use of a cylindrical microlens array to get useful concentration without tracking during the day. To use only a seasonal tracking system and get the highest possible concentration, cylindrical microlenses are placed in the east-west orientation. Our new design has an acceptance angle in the north-south direction of ±9° and ±54° in the east-west axis. Simulation of our optimized system achieves a 4.6× average concentration level from 8:30 to 16:30 with a maximum of 8.1× and 80% optical efficiency. The low-cost advantage of waveguide-based solar concentrators could support their use in roof-mounted solar panels and eliminate the need for an expensive and heavy active tracker.

Tunable liquid crystal photonic devices

NASA Astrophysics Data System (ADS)

Fan, Yun-Hsing

2005-07-01

Liquid crystal (LC)-based adaptive optics are important for information processing, optical interconnections, photonics, integrated optics, and optical communications due to their tunable optical properties. In this dissertation, we describe novel liquid crystal photonic devices. In Chap. 3, we demonstrate a novel electrically tunable-efficiency Fresnel lens which is devised for the first time using nanoscale PDLC. The tunable Fresnel lens is very desirable to eliminate the need of external spatial light modulator. The nanoscale LC devices are polarization independent and exhibit a fast response time. Because of the small droplet sizes, the operating voltage is higher than 100 Vrms. To lower the driving voltage, in Chap. 2 and Chap. 3, we have investigated tunable Fresnel lens using polymer-network liquid crystal (PNLC) and phase-separated composite film (PSCOF). The operating voltage is below 12 Vrms. The PNLC and PSCOF devices are polarization dependent. To overcome this shortcoming, stacking two cells with orthogonal alignment directions is a possibility. Using PNLC, we also demonstrated LC blazed grating. The diffraction efficiency of these devices is continuously controlled by the electric field. We also develop a system with continuously tunable focal length. A conventional mechanical zooming system is bulky and power hungry. In Chap. 4, we developed an electrically tunable-focus flat LC spherical lens and microlens array. A huge tunable range from 0.6 m to infinity is achieved by the applied voltage. In Chap. 5, we describe a LC microlens array whose focal length can be switched from positive to negative by the applied voltage. The fast response time feature of our LC microlens array will be very helpful in developing 3-D animated images. In Chap. 6, we demonstrate polymer network liquid crystals for switchable polarizers and optical shutters. The use of dual-frequency liquid crystal and special driving scheme leads to a sub-millisecond response time. In Chap. 7, for the first time, we demonstrate a fast-response and scattering-free homogeneously-aligned PNLC light modulator. The PNLC response time is ˜300x faster than that of a pure LC mixture. The PNLC cell also holds promise for mid and long infrared applications where response time is a critical issue.

Fiber optic coupling of a microlens conditioned, stacked semiconductor laser diode array

DOEpatents

Beach, R.J.; Benett, W.J.; Mills, S.T.

1997-04-01

The output radiation from the two-dimensional aperture of a semiconductor laser diode array is efficiently coupled into an optical fiber. The two-dimensional aperture is formed by stacking individual laser diode bars on top of another in a ``rack and stack`` configuration. Coupling into the fiber is then accomplished using individual microlenses to condition the output radiation of the laser diode bars. A lens that matches the divergence properties and wavefront characteristics of the laser light to the fiber optic is used to focus this conditioned radiation into the fiber. 3 figs.

Integrated three-dimensional optical MEMS for chip-based fluorescence detection

NASA Astrophysics Data System (ADS)

Hung, Kuo-Yung; Tseng, Fan-Gang; Khoo, Hwa-Seng

2009-04-01

This paper presents a novel fluorescence sensing chip for parallel protein microarray detection in the context of a 3-in-1 protein chip system. This portable microchip consists of a monolithic integration of CMOS-based avalanche photo diodes (APDs) combined with a polymer micro-lens, a set of three-dimensional (3D) inclined mirrors for separating adjacent light signals and a low-noise transformer-free dc-dc boost mini-circuit to power the APDs (ripple below 1.28 mV, 0-5 V input, 142 V and 12 mA output). We fabricated our APDs using the planar CMOS process so as to facilitate the post-CMOS integration of optical MEMS components such as the lenses. The APD arrays were arranged in unique circular patterns appropriate for detecting the specific fluorescently labelled protein spots in our study. The array-type APDs were designed so as to compensate for any alignment error as detected by a positional error signal algorithm. The condenser lens was used as a structure for light collection to enhance the fluorescent signals by about 25%. This element also helped to reduce the light loss due to surface absorption. We fabricated an inclined mirror to separate two adjacent fluorescent signals from different specimens. Excitation using evanescent waves helped reduce the interference of the excitation light source. This approach also reduced the number of required optical lenses and minimized the complexity of the structural design. We achieved detection floors for anti-rabbit IgG and Cy5 fluorescent dye as low as 0.5 ng/µl (~3.268 nM). We argue that the intrinsic nature of point-to-point and batch-detection methods as showcased in our chip offers advantages over the serial-scanning approach used in traditional scanner systems. In addition, our system is low cost and lightweight.

Self-aligned process for forming microlenses at the tips of vertical silicon nanowires by atomic layer deposition

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dan, Yaping, E-mail: yaping.dan@sjtu.edu.cn; Chen, Kaixiang; Crozier, Kenneth B.

The microlens is a key enabling technology in optoelectronics, permitting light to be efficiently coupled to and from devices such as image sensors and light-emitting diodes. Their ubiquitous nature motivates the development of new fabrication techniques, since existing methods face challenges as microlenses are scaled to smaller dimensions. Here, the authors demonstrate the formation of microlenses at the tips of vertically oriented silicon nanowires via a rapid atomic layer deposition process. The nature of the process is such that the microlenses are centered on the nanowires, and there is a self-limiting effect on the final sizes of the microlenses arisingmore » from the nanowire spacing. Finite difference time domain electromagnetic simulations are performed of microlens focusing properties, including showing their ability to enhance visible-wavelength absorption in silicon nanowires.« less

Chromatic control in coextruded layered polymer microlenses

NASA Astrophysics Data System (ADS)

Crescimanno, Michael; Oder, Tom N.; Andrews, James H.; Zhou, Chuanhong; Petrus, Joshua B.; Merlo, Cory; Bagheri, Cameron; Hetzel, Connor; Tancabel, James; Singer, Kenneth D.; Baer, Eric

2014-12-01

We describe the formation, characterization and theoretical understanding of microlenses comprised of alternating polystyrene and polymethylmethacrylate layers produced by multilayer coextrusion. These lenses are fabricated by photolithography, using a grayscale mask followed by plasma etching, so that the refractive index alternation of the bilayer stack appears across the radius of the microlens. The alternating quarter-wave thick layers form a one-dimensional photonic crystal whose dispersion augments the material dispersion, allowing one to sculpt the chromatic dispersion of the lens by adjusting the layered structure. Using Huygen's principle, we model our experimental measurements of the focal length of these lenses across the reflection band of the multilayer polymer film from which the microlens is fashioned. For a 56 micron diameter multilayered lens of focal length 300 microns, we measured a nearly 25 percent variation in the focal length across a shallow, 50 nm-wide reflection band.

Highly uniform parallel microfabrication using a large numerical aperture system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zhang, Zi-Yu; Su, Ya-Hui, E-mail: ustcsyh@ahu.edu.cn, E-mail: dongwu@ustc.edu.cn; Zhang, Chen-Chu

In this letter, we report an improved algorithm to produce accurate phase patterns for generating highly uniform diffraction-limited multifocal arrays in a large numerical aperture objective system. It is shown that based on the original diffraction integral, the uniformity of the diffraction-limited focal arrays can be improved from ∼75% to >97%, owing to the critical consideration of the aperture function and apodization effect associated with a large numerical aperture objective. The experimental results, e.g., 3 × 3 arrays of square and triangle, seven microlens arrays with high uniformity, further verify the advantage of the improved algorithm. This algorithm enables the laser parallelmore » processing technology to realize uniform microstructures and functional devices in the microfabrication system with a large numerical aperture objective.« less

MEMS compatible illumination and imaging micro-optical systems

NASA Astrophysics Data System (ADS)

Bräuer, A.; Dannberg, P.; Duparré, J.; Höfer, B.; Schreiber, P.; Scholles, M.

2007-01-01

The development of new MOEMS demands for cooperation between researchers in micromechanics, optoelectronics and microoptics at a very early state. Additionally, microoptical technologies being compatible with structured silicon have to be developed. The microoptical technologies used for two silicon based microsystems are described in the paper. First, a very small scanning laser projector with a volume of less than 2 cm 3, which operates with a directly modulated lasers collimated with a microlens, is shown. The laser radiation illuminates a 2D-MEMS scanning mirror. The optical design is optimized for high resolution (VGA). Thermomechanical stability is realized by design and using a structured ceramics motherboard. Secondly, an ultrathin CMOS-camera having an insect inspired imaging system has been realized. It is the first experimental realization of an artificial compound eye. Micro-optical design principles and technology is used. The overall thickness of the imaging system is only 320 μm, the diagonal field of view is 21°, and the f-number is 2.6. The monolithic device consists of an UV-replicated microlens array upon a thin silica substrate with a pinhole array in a metal layer on the back side. The pitch of the pinholes differs from that of the lens array to provide individual viewing angle for each channel. The imaging chip is directly glued to a CMOS sensor with adapted pitch. The whole camera is less than 1mm thick. New packaging methods for these systems are under development.

SU-D-213-03: Towards An Optimized 3D Scintillation Dosimetry Tool for Quality Assurance of Dynamic Radiotherapy Techniques

DOE Office of Scientific and Technical Information (OSTI.GOV)

Rilling, M; Centre de Recherche sur le Cancer, Hôtel-Dieu de Québec, Quebec City, QC; Département de radio-oncologie, CHU de Québec, Quebec City, QC

2015-06-15

Purpose: The purpose of this work is to simulate a multi-focus plenoptic camera used as the measuring device in a real-time three-dimensional scintillation dosimeter. Simulating and optimizing this realistic optical system will bridge the technological gap between concept validation and a clinically viable tool that can provide highly efficient, accurate and precise measurements for dynamic radiotherapy techniques. Methods: The experimental prototype, previously developed for proof of concept purposes, uses an off-the-shelf multi-focus plenoptic camera. With an array of interleaved microlenses of different focal lengths, this camera records spatial and angular information of light emitted by a plastic scintillator volume. Themore » three distinct microlens focal lengths were determined experimentally for use as baseline parameters by measuring image-to-object magnification for different distances in object space. A simulated plenoptic system was implemented using the non-sequential ray tracing software Zemax: this tool allows complete simulation of multiple optical paths by modeling interactions at interfaces such as scatter, diffraction, reflection and refraction. The active sensor was modeled based on the camera manufacturer specifications by a 2048×2048, 5 µm-pixel pitch sensor. Planar light sources, simulating the plastic scintillator volume, were employed for ray tracing simulations. Results: The microlens focal lengths were determined to be 384, 327 and 290 µm. A realistic multi-focus plenoptic system, with independently defined and optimizable specifications, was fully simulated. A f/2.9 and 54 mm-focal length Double Gauss objective was modeled as the system’s main lens. A three-focal length hexagonal microlens array of 250-µm thickness was designed, acting as an image-relay system between the main lens and sensor. Conclusion: Simulation of a fully modeled multi-focus plenoptic camera enables the decoupled optimization of the main lens and microlens specifications. This work leads the way to improving the 3D dosimeter’s achievable resolution, efficiency and build for providing a quality assurance tool fully meeting clinical needs. M.R. is financially supported by a Master’s Canada Graduate Scholarship from the NSERC. This research is also supported by the NSERC Industrial Research Chair in Optical Design.« less

Methods and apparatus for laser beam scanners with different actuating mechanisms

NASA Astrophysics Data System (ADS)

Chen, Si-hai; Xiang, Si-hua; Wu, Xin; Dong, Shan; Xiao, Ding; Zheng, Xia-wei

2009-07-01

In this paper, 3 types of laser beam scanner are introduced. One is transmissive beam scanner, which is composed of convex and concave microlens arrays (MLAs). By moving the concave lens in the plane vertical to the optical axis, the incident beam can be deflected in two dimensions. Those two kinds of MLAs are fabricated by thermal reflow and replication process. A set of mechanical scanner frame is fabricated with the two MLAs assembling in it. The testing result shown that the beam deflection angles are 9.5° and 9.6°, in the 2 dimension(2D) with the scanning frequency of 2 HZ and 8 HZ, respectively. The second type of laser beam scanner is actuated by voice coil actuators (VCAs). Based on ANSOFT MAXWELL software, we have designed VCAs with small size and large force which have optimized properties. The model of VCAs is built using AutoCAD and is analyzed by Ansoft maxwell. According to the simulation results, high performance VCAs are fabricated and tested. The result is that the force of the VCAs is 6.39N/A, and the displacement is +/-2.5mm. A set up of beam scanner is fabricated and actuated by the designed VCAs. The testing result shown that the two dimensional scanning angle is 15° and 10° respectively at the frequency of 60HZ. The two dimensional scanning angle is 8.3° and 6° respectively at the frequency of 100HZ. The third type of scanner is actuated by amplified piezoelectric actuators (APAs). The scanning mirror is actuated by the piezoelectric (PZ) actuators with the scanning frequency of 700HZ, 250HZ and 87HZ respectively. The optical scanning angle is +/-0.5° at the three frequencies.

Planar waveguide integrated spatial filter array

NASA Astrophysics Data System (ADS)

Ai, Jun; Dimov, Fedor; Lyon, Richard; Rakuljic, Neven; Griffo, Chris; Xia, Xiaowei; Arik, Engin

2013-09-01

An innovative integrated spatial filter array (iSFA) was developed for the nulling interferometer for the detection of earth-like planets and life beyond our solar system. The coherent iSFA comprised a 2D planar lightwave circuit (PLC) array coupled with a pair of 2D lenslet arrays in a hexagonal grid to achieve the optimum fill factor and throughput. The silica-on-silicon waveguide mode field diameter and numerical aperture (NA) were designed to match with the Airy disc and NA of the microlens for optimum coupling. The lenslet array was coated with a chromium pinhole array at the focal plane to pass the single-mode waveguide but attenuate the higher modes. We assembled a 32 by 30 array by stacking 32 chips that were produced by photolithography from a 6-in. silicon wafer. Each chip has 30 planar waveguides. The PLC array is inherently polarization-maintaining (PM) and requires much less alignment in contrast to a fiber array, where each PM fiber must be placed individually and oriented correctly. The PLC array offers better scalability than the fiber bundle array for large arrays of over 1,000 waveguides.

Coupling Photonics and Coherent Spintronics for Low-Loss Flexible Optical Logic

DTIC Science & Technology

2015-12-02

AFRL-AFOSR-VA-TR-2016-0055 Coupling photonics and coherent spintronics for low-loss flexible optical logic Jesse Berezovsky CASE WESTERN RESERVE UNIV...2012 - 14/06/2015 4. TITLE AND SUBTITLE Coupling photonics and coherent spintronics for low-loss flexible optical logic 5a. CONTRACT NUMBER 5b...into devices, ranging from macroscopic optical cavities, to arrays of microlens cavities, to quantum dot-impregnated integrated polymer waveguides

Collimating slicer for optical integral field spectroscopy

NASA Astrophysics Data System (ADS)

Laurent, Florence; Hénault, François

2016-07-01

Integral Field Spectroscopy (IFS) is a technique that gives simultaneously the spectrum of each spatial sampling element of a given field. It is a powerful tool which rearranges the data cube represented by two spatial dimensions defining the field and the spectral decomposition (x, y, λ) in a detector plane. In IFS, the "spatial" unit reorganizes the field, the "spectral" unit is being composed of a classical spectrograph. For the spatial unit, three main techniques - microlens array, microlens array associated with fibres and image slicer - are used in astronomical instrumentations. The development of a Collimating Slicer is to propose a new type of optical integral field spectroscopy which should be more compact. The main idea is to combine the image slicer with the collimator of the spectrograph mixing the "spatial" and "spectral" units. The traditional combination of slicer, pupil and slit elements and spectrograph collimator is replaced by a new one composed of a slicer and spectrograph collimator only. After testing few configurations, this new system looks very promising for low resolution spectrographs. In this paper, the state of art of integral field spectroscopy using image slicers will be described. The new system based onto the development of a Collimating Slicer for optical integral field spectroscopy will be depicted. First system analysis results and future improvements will be discussed.

Phase recording for formation of holographic optical elements on silver-halide photographic emulsions

NASA Astrophysics Data System (ADS)

Ganzherli, Nina M.; Gulyaev, Sergey N.; Maurer, Irina A.; Chernykh, Dmitrii F.

2009-05-01

Holographic fabrication methods of regular and nonregular relief-phase structures on silver-halide photographic emulsions are considered. Methods of gelatin photodestruction under short-wave ultra-violet radiation and chemical hardening with the help of dichromated solutions were used as a technique for surface relief formation. The developed techniques permitted us to study specimens of holographic diffusers and microlens rasters with small absorption and high light efficiency.

Design and simulation of a planar micro-optic free-space receiver

NASA Astrophysics Data System (ADS)

Nadler, Brett R.; Hallas, Justin M.; Karp, Jason H.; Ford, Joseph E.

2017-11-01

We propose a compact directional optical receiver for free-space communications, where a microlens array and micro-optic structures selectively couple light from a narrow incidence angle into a thin slab waveguide and then to an edge-mounted detector. A small lateral translation of the lenslet array controls the coupled input angle, enabling the receiver to select the transmitter source direction. We present the optical design and simulation of a 10mm x 10mm aperture receiver using a 30μm thick silicon waveguide able to couple up to 2.5Gbps modulated input to a 10mm x 30μm wide detector.

Integration of high power laser diodes with microoptical components in a compact pumping source for visible fiber laser

NASA Astrophysics Data System (ADS)

Goering, Rolf; Hoefer, Bernd; Kraeplin, Anke; Schreiber, Peter; Kley, Ernst-Bernhard; Schmeisser, Volkmar

1999-04-01

A novel technique, the so-called skew ray imaging concept, has been developed for beam transformation of high power diode laser bars. It leads to beam circularization with optimum brightness conservation. This concept uses two key microoptical components: a fast axis collimator microlens (FAC) of high isoplanatism and a special array of beam deflecting elements, the number of which corresponds to the single emitter number of the diode laser. Using this concept of skew ray imaging in a modified form, prototypes of pumping sources for visible fiber laser have been developed and built up. Several watts of optical power have been focused into a small spot of 25 micrometers with a numerical aperture of 0.35. GRIN cylindrical microlenses with 0.1 mm focal length and diffractive blazed gratings as redirector have been used. The grating periods of the redirector sections have been between 8 and 100 (mu) M. They have been produced by e-beam direct writing in resist. After optimization of the fabrication process the diffraction efficiencies of al sections have been beyond 86 percent with good reproducibility. Special techniques have been sued for system integration. The FAC microlenses have been attached to a copper lens holder with a subsequent gluing process of the holder to the laser diode heatsink. A UV-curable adhesive with extremely low shrinkage has been selected. The redirector element has been integrated with an additional possibility for lateral adjustment in order to compensate minor residual walk-off effects of the microlens when the laser power is varied from zero to maximum. A very compact pumping source of 3 inches X 1 inch X 1 inch dimensions has been realized with 5 W optical power in the desired spot. First diode pumped fiber laser operation in the visible has been demonstrated with this source.

Demonstration of a plenoptic microscope based on laser optical feedback imaging.

PubMed

Glastre, Wilfried; Hugon, Olivier; Jacquin, Olivier; Guillet de Chatellus, Hugues; Lacot, Eric

2013-03-25

A new kind of plenoptic imaging system based on Laser Optical Feedback Imaging (LOFI) is presented and is compared to another previously existing device based on microlens array. Improved photometric performances, resolution and depth of field are obtained at the price of a slow point by point scanning. Main properties of plenoptic microscopes such as numerical refocusing on any curved surface or aberrations compensation are both theoretically and experimentally demonstrated with a LOFI-based device.

Liquid Crystal Based Optical Phased Array for Steering Lasers

DTIC Science & Technology

2009-10-01

profile into the liquid crystal cell, the first step is to characterize the LC cell’s OPD curve with respect to the ramped voltage by a simple one...corresponding voltage value on the OPD vs. 22 Voltage curve , the first entry voltage profile of a positive or negative micro-lens can be thereby...Fig. 2.6 Optical path delay (OPD) profile of ideal objective positive (blue curve ) and negative (green curve ) lens with 552 μm radius, no

Joint estimation of high resolution images and depth maps from light field cameras

NASA Astrophysics Data System (ADS)

Ohashi, Kazuki; Takahashi, Keita; Fujii, Toshiaki

2014-03-01

Light field cameras are attracting much attention as tools for acquiring 3D information of a scene through a single camera. The main drawback of typical lenselet-based light field cameras is the limited resolution. This limitation comes from the structure where a microlens array is inserted between the sensor and the main lens. The microlens array projects 4D light field on a single 2D image sensor at the sacrifice of the resolution; the angular resolution and the position resolution trade-off under the fixed resolution of the image sensor. This fundamental trade-off remains after the raw light field image is converted to a set of sub-aperture images. The purpose of our study is to estimate a higher resolution image from low resolution sub-aperture images using a framework of super-resolution reconstruction. In this reconstruction, these sub-aperture images should be registered as accurately as possible. This registration is equivalent to depth estimation. Therefore, we propose a method where super-resolution and depth refinement are performed alternatively. Most of the process of our method is implemented by image processing operations. We present several experimental results using a Lytro camera, where we increased the resolution of a sub-aperture image by three times horizontally and vertically. Our method can produce clearer images compared to the original sub-aperture images and the case without depth refinement.

Techniques of noninvasive optical tomographic imaging

NASA Astrophysics Data System (ADS)

Rosen, Joseph; Abookasis, David; Gokhler, Mark

2006-01-01

Recently invented methods of optical tomographic imaging through scattering and absorbing media are presented. In one method, the three-dimensional structure of an object hidden between two biological tissues is recovered from many noisy speckle pictures obtained on the output of a multi-channeled optical imaging system. Objects are recovered from many speckled images observed by a digital camera through two stereoscopic microlens arrays. Each microlens in each array generates a speckle image of the object buried between the layers. In the computer each image is Fourier transformed jointly with an image of the speckled point-like source captured under the same conditions. A set of the squared magnitudes of the Fourier-transformed pictures is accumulated to form a single average picture. This final picture is again Fourier transformed, resulting in the three-dimensional reconstruction of the hidden object. In the other method, the effect of spatial longitudinal coherence is used for imaging through an absorbing layer with different thickness, or different index of refraction, along the layer. The technique is based on synthesis of multiple peak spatial degree of coherence. This degree of coherence enables us to scan simultaneously different sample points on different altitudes, and thus decreases the acquisition time. The same multi peak degree of coherence is also used for imaging through the absorbing layer. Our entire experiments are performed with a quasi-monochromatic light source. Therefore problems of dispersion and inhomogeneous absorption are avoided.

Curvature Control of Silicon Microlens for THz Dielectric Antenna

NASA Technical Reports Server (NTRS)

Lee, Choonsup; Chattopadhyay, Goutam; Cooper, Ken; Mehdi, Imran

2012-01-01

We have controlled the curvature of silicon microlens by changing the amount of photoresist in order to microfabricate hemispherical silicon microlens which can improve the directivity and reduce substrate mode losses.

Periodically patterned structures for nanoplasmonic and biomedical applications

NASA Astrophysics Data System (ADS)

Peer, Akshit

Periodically patterned nanostructures have imparted profound impact on diverse scientific disciplines. In physics, chemistry, and materials science, artificially engineered photonic crystals have demonstrated an unprecedented ability to control the propagation of photons through light concentration and diffraction. The field of photonic crystals has led to many technical advances in fabricating periodically patterned nanostructures in dielectric/metallic materials and controlling the light-matter interactions at the nanoscale. In the field of biomaterials, it is of great interest to apply our knowledge base of photonic materials and explore how such periodically patterned structures control diverse biological functions by varying the available surface area, which is a key attribute for surface hydrophobicity, cell growth and drug delivery. Here we describe closely related scientific applications of large-scale periodically patterned polymers and metal nanostructures. The dissertation starts with nanoplasmonics for improving photovoltaic devices, where we design and optimize experimentally realizable light-trapping nanostructures using rigorous scattering matrix simulations for enhancing the performance of organic and perovskite solar cells. The use of periodically patterned plasmonic metal cathode in conjunction with polymer microlens array significantly improves the absorption in solar cells, providing new opportunities for photovoltaic device design. We further show the unprecedented ability of nanoplasmonics to concentrate light at the nanoscale by designing a large-area plasmonic nanocup array with frequency-selective optical transmission. The fabrication of nanostructure is achieved by coating non-uniform gold layer over a submicron periodic nanocup array imprinted on polystyrene using soft lithography. The gold nanocup array shows extraordinary optical transmission at a wavelength close to the structure period. The resonance wavelength for transmission can be tuned by changing the period of the gold nanocup array, which opens up new avenues in subwavelength optics for designing optoelectronic devices and biological sensors. We then demonstrate strong exciton-plasmon coupling between non-toxic CuInS2/ZnS quantum dots in solution and plasmonic gold nanocup array. The photoluminescence decay rate of quantum dots can be enhanced by more than an order of magnitude due to the high electric field intensity enhancement inside the plasmonic nanocup cavity. This solution based metal-nanocrystal coupled system has great promise for biological applications such as biosensing and biolabeling. Moving to the area of biomedical applications, we fabricate nanopatterned biopolymers as templates for controlling the release of therapeutic drugs coated on the polymer surface. From careful drug release experiments performed over extended time periods (e.g. eight days), we find that nanopatterned polymers release the drug slower as compared to the flat polymer surfaces. The slow-down in the drug release from nanopatterned surfaces is attributed to increase in the surface hydrophobicity confirmed by the contact angle measurements and microfluidic simulations. This nanoscale drug release control scheme has great promise for improving the performance of drug-eluting stents in cardiac therapies.

A compressive-sensing Fourier-transform on-chip Raman spectrometer

NASA Astrophysics Data System (ADS)

Podmore, Hugh; Scott, Alan; Lee, Regina

2018-02-01

We demonstrate a novel compressive sensing Fourier-transform spectrometer (FTS) for snapshot Raman spectroscopy in a compact format. The on-chip FTS consists of a set of planar-waveguide Mach-Zehnder interferometers (MZIs) arrayed on a photonic chip, effecting a discrete Fourier-transform of the input spectrum. Incoherence between the sampling domain (time), and the spectral domain (frequency) permits compressive sensing retrieval using undersampled interferograms for sparse spectra such as Raman emission. In our fabricated device we retain our chosen bandwidth and resolution while reducing the number of MZIs, e.g. the size of the interferogram, to 1/4th critical sampling. This architecture simultaneously reduces chip footprint and concentrates the interferogram in fewer pixels to improve the signal to noise ratio. Our device collects interferogram samples simultaneously, therefore a time-gated detector may be used to separate Raman peaks from sample fluorescence. A challenge for FTS waveguide spectrometers is to achieve multi-aperture high throughput broadband coupling to a large number of single-mode waveguides. A multi-aperture design allows one to increase the bandwidth and spectral resolution without sacrificing optical throughput. In this device, multi-aperture coupling is achieved using an array of microlenses bonded to the surface of the chip, and aligned with a grid of vertically illuminated waveguide apertures. The microlens array accepts a collimated beam with near 100% fill-factor, and the resulting spherical wavefronts are coupled into the single-mode waveguides using 45& mirrors etched into the waveguide layer via focused ion-beam (FIB). The interferogram from the waveguide outputs is imaged using a CCD, and inverted via l1-norm minimization to correctly retrieve a sparse input spectrum.

Laser microprocessing and nanoengineering of large-area functional micro/nanostructures

NASA Astrophysics Data System (ADS)

Tang, M.; Xie, X. Z.; Yang, J.; Chen, Z. C.; Xu, L.; Choo, Y. S.; Hong, M. H.

2011-12-01

Laser microprocessing and nanoengineering are of great interest to both scientists and engineers, since the inspired properties of functional micro/nanostructures over large areas can lead to numerous unique applications. Currently laser processing systems combined with high speed automation ensure the focused laser beam to process various materials at a high throughput and a high accuracy over large working areas. UV lasers are widely used in both laser microprocessing and nanoengineering. However by improving the processing methods, green pulsed laser is capable of replacing UV lasers to make high aspect ratio micro-grooves on fragile and transparent sapphire substrates. Laser micro-texturing can also tune the wetting property of metal surfaces from hydrophilic to super-hydrophobic at a contact angle of 161° without chemical coating. Laser microlens array (MLA) can split a laser beam into multiple laser beams and reduce the laser spot size down to sub-microns. It can be applied to fabricate split ring resonator (SRR) meta-materials for THz sensing, surface plasmonic resonance (SPR) structures for NIR and molding tools for soft lithography. Furthermore, laser interference lithography combined with thermal annealing can obtain a large area of sub-50nm nano-dot clusters used for SPR applications.

Thermal analysis of microlens formation on a sensitized gelatin layer

DOE Office of Scientific and Technical Information (OSTI.GOV)

Muric, Branka; Pantelic, Dejan; Vasiljevic, Darko

2009-07-01

We analyze a mechanism of direct laser writing of microlenses. We find that thermal effects and photochemical reactions are responsible for microlens formation on a sensitized gelatin layer. An infrared camera was used to assess the temperature distribution during the microlens formation, while the diffraction pattern produced by the microlens itself was used to estimate optical properties. The study of thermal processes enabled us to establish the correlation between thermal and optical parameters.

Transverse-To-Longitudinal Photocathode Distribution Imaging

DOE Office of Scientific and Technical Information (OSTI.GOV)

Halavanau, A.; Qiang, G.; Ha, G.

In this paper, we present a tunable picosecond-scale bunch train generation technique combining a microlens array (MLA) transverse laser shaper and a transverse-to-longitudinal emittance exchange (EEX) beamline. The modulated beamlet array is formed at the photocathode with the MLA setup. The resulting patterned electron beam is accelerated to 50 MeV and transported to the entrance of the EEX setup. A quadrupole channel is used to adjust the transverse spacing of the beamlet array upstream of the EEX, thereby enabling the generation of a bunch train with tunable separation downstream of the EEX beamline. Additionally, the MLA is mounted on amore » rotation stage which provides ad- ditional flexibility to produce high-frequency beam density modulation downstream of the EEX. Experimental results obtained at the Argonne Wakefield Accelerator (AWA) facil- ity are presented and compared with numerical simulations.« less

Correlation plenoptic imaging

NASA Astrophysics Data System (ADS)

Pepe, Francesco V.; Di Lena, Francesco; Garuccio, Augusto; D'Angelo, Milena

2017-06-01

Plenoptic Imaging (PI) is a novel optical technique for achieving tridimensional imaging in a single shot. In conventional PI, a microlens array is inserted in the native image plane and the sensor array is moved behind the microlenses. On the one hand, the microlenses act as imaging pixels to reproduce the image of the scene; on the other hand, each microlens reproduces on the sensor array an image of the camera lens, thus providing the angular information associated with each imaging pixel. The recorded propagation direction is exploited, in post- processing, to computationally retrace the geometrical light path, thus enabling the refocusing of different planes within the scene, the extension of the depth of field of the acquired image, as well as the 3D reconstruction of the scene. However, a trade-off between spatial and angular resolution is built in the standard plenoptic imaging process. We demonstrate that the second-order spatio-temporal correlation properties of light can be exploited to overcome this fundamental limitation. Using two correlated beams, from either a chaotic or an entangled photon source, we can perform imaging in one arm and simultaneously obtain the angular information in the other arm. In fact, we show that the second order correlation function possesses plenoptic imaging properties (i.e., it encodes both spatial and angular information), and is thus characterized by a key re-focusing and 3D imaging capability. From a fundamental standpoint, the plenoptic application is the first situation where the counterintuitive properties of correlated systems are effectively used to beat intrinsic limits of standard imaging systems. From a practical standpoint, our protocol can dramatically enhance the potentials of PI, paving the way towards its promising applications.

High efficiency blue and white phosphorescent organic light emitting devices

NASA Astrophysics Data System (ADS)

Eom, Sang-Hyun

Organic light-emitting devices (OLEDs) have important applications in full-color flat-panel displays and as solid-state lighting sources. Achieving high efficiency deep-blue phosphorescent OLEDs (PHOLEDs) is necessary for high performance full-color displays and white light sources with a high color rendering index (CRI); however it is more challenging compared to the longer wavelength light emissions such as green and red due to the higher energy excitations for the deep-blue emitter as well as the weak photopic response of deep-blue emission. This thesis details several effective strategies to enhancing efficiencies of deep-blue PHOLEDs based on iridium(III) bis(4',6'-difluorophenylpyridinato)tetrakis(1-pyrazolyl)borate (FIr6), which are further employed to demonstrate high efficiency white OLEDs by combining the deep-blue emitter with green and red emitters. First, we have employed 1,1-bis-(di-4-tolylaminophenyl) cyclohexane (TAPC) as the hole transporting material to enhance electron and triplet exciton confinement in Fir6-based PHOLEDs, which increased external quantum efficiency up to 18 %. Second, dual-emissive-layer (D-EML) structures consisting of an N,N -dicarbazolyl-3,5-benzene (mCP) layer doped with 4 wt % FIr6 and a p-bis (triphenylsilyly)benzene (UGH2) layer doped with 25 wt % FIr6 was employed to maximize exciton generation in the emissive layer. Combined with the p-i-n device structure, high power efficiencies of (25 +/- 2) lm/W at 100 cd/m2 and (20 +/- 2) lm/W at 1000 cd/m 2 were achieved. Moreover, the peak external quantum efficiency of (20 +/- 1) % was achieved by employing tris[3-(3-pyridyl)mesityl]borane (3TPYMB) as the electron transporting material, which further improves the exciton confinement in the emissive layer. With Cs2CO3 doping in the 3TPYMB layer to greatly increase its electrical conductivity, a peak power efficiency up to (36 +/- 2) lm/W from the deep-blue PHOLED was achieved, which also maintains Commission Internationale de L'Eclairage (CIE) coordinates of (0.16, 0.28). High efficiency white PHOLEDs are also demonstrated by incorporating green and red phosphorescent emitters together with the deep-blue emitter FIr6. Similar to the FIr6-only devices, the D-EML structure with high triplet energy charge transport materials leads to a maximum external quantum efficiency of (19 +/- 1) %. Using the p-i-n device structure, a peak power efficiency of (40 +/- 2) lm/W and (36 +/- 2) lm/W at 100 cd/m2 were achieved, and the white PHOLED possesses a CRI of 79 and CIE coordinates of (0.37, 0.40). The limited light extraction from the planar-type OLEDs is also one of the remaining challenges to the OLED efficiency. Here we have developed a simple soft lithography technique to fabricate a transparent, close-packed hemispherical microlens arrays. The application of such microlens arrays to the glass surface of the large-area fluorescent OLEDs enhanced the light extraction efficiency up to (70 +/- 7)%. It is also shown that the light extraction efficiency of the OLEDs is affected by microlens contact angle, OLEDs size, and detailed layer structure of the OLEDs.

Automatic calibration method for plenoptic camera

NASA Astrophysics Data System (ADS)

Luan, Yinsen; He, Xing; Xu, Bing; Yang, Ping; Tang, Guomao

2016-04-01

An automatic calibration method is proposed for a microlens-based plenoptic camera. First, all microlens images on the white image are searched and recognized automatically based on digital morphology. Then, the center points of microlens images are rearranged according to their relative position relationships. Consequently, the microlens images are located, i.e., the plenoptic camera is calibrated without the prior knowledge of camera parameters. Furthermore, this method is appropriate for all types of microlens-based plenoptic cameras, even the multifocus plenoptic camera, the plenoptic camera with arbitrarily arranged microlenses, or the plenoptic camera with different sizes of microlenses. Finally, we verify our method by the raw data of Lytro. The experiments show that our method has higher intelligence than the methods published before.

High-throughput ultraviolet photoacoustic microscopy with multifocal excitation

NASA Astrophysics Data System (ADS)

Imai, Toru; Shi, Junhui; Wong, Terence T. W.; Li, Lei; Zhu, Liren; Wang, Lihong V.

2018-03-01

Ultraviolet photoacoustic microscopy (UV-PAM) is a promising intraoperative tool for surgical margin assessment (SMA), one that can provide label-free histology-like images with high resolution. In this study, using a microlens array and a one-dimensional (1-D) array ultrasonic transducer, we developed a high-throughput multifocal UV-PAM (MF-UV-PAM). Our new system achieved a 1.6 ± 0.2 μm lateral resolution and produced images 40 times faster than the previously developed point-by-point scanning UV-PAM. MF-UV-PAM provided a readily comprehensible photoacoustic image of a mouse brain slice with specific absorption contrast in ˜16 min, highlighting cell nuclei. Individual cell nuclei could be clearly resolved, showing its practical potential for intraoperative SMA.

Electron Beam Pattern Rotation as a Method of Tunable Bunch Train Generation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Halavanau, A.; Piot, P.

Transversely modulated electron beams can be formed in photo injectors via microlens array (MLA) UV laser shap- ing technique. Microlenses can be arranged in polygonal lattices, with resulting transverse electron beam modula- tion mimicking the lenses pattern. Conventionally, square MLAs are used for UV laser beam shaping, and generated electron beam patterns form square beamlet arrays. The MLA setup can be placed on a rotational mount, thereby rotating electron beam distribution. In combination with transverse-to-longitudinal emittance exchange (EEX) beam line, it allows to vary beamlets horizontal projection and tune electron bunch train. In this paper, we extend the technique tomore » the case of different MLA lattice arrangements and explore the benefits of its rotational symmetries.« less

Novel Design of Tunable Microlens with Lowered Driving Voltage and Iris with Conformal Antireflective Surface

NASA Astrophysics Data System (ADS)

Almoallem, Yousuf Dawood

Miniaturizing camera systems as required in many new compact devices places a severe restriction on the device size and power consumption. In modern life nowadays, a daily used compact devices like mobile phones and tablets must have some essential components such as single or multiple tiny cameras, as a component of micro-optical systems. In fact, for most of the current miniaturized cameras, optical power is varied based on the traditional situation where the distances between the lenses are mechanically varied relying on old-fashioned voice coil motors or equivalent mechanical drivers. Spatial and power consumption could be scaled down drastically with much faster response time when the revolutionary alternative liquid tunable microlens is utilized after acquiring a good understanding of microfluidics. The influence of interfacial tension as a key metric in controlling microfluidics systems (e.g. liquid microlens) has drawn considerable attention in biomedical, industrial, military fields over the past decade. Tunable microlenses overcome aforementioned concerns of miniaturizing optical systems and present a viable solution by tuning the focal length of lenses via, for example, variation in the lens curvature. Here, a novel tunable dielectrophoretic (DEP)-based tunable lens is presented. Out of many other mechanisms of tuning the lenses, the dielectric mechanism is especially promising since having the capability to achieve a faster response and overcome the electrolysis issue. Nonetheless, DEP usually requires high driving voltage levels. The proposed design is operating with a lowered voltage level and is based on a tunable dielectric liquid lens with a double-sided electrode design, unlike in the conventional scheme with a single-sided electrode design. The design methodology, geometrical analysis, device fabrication, simulation, and testing are demonstrated. Furthermore, the design, simulation, fabrication and characterization of a black-silicon (BSi) based iris is discussed. Reducing undesirable light stray reflections from surfaces is desired in many 3D optical elements, such as supporting optomechanical mounts, irises, optical filters, solar cells, and photolithography underlying layers. BSi (as antireflective nanostructures) provides a potential economic solution which is highly absorptive across the visible spectrum to replace many currently used yet expensive coating materials. Si nanowires (SiNW) were formed using a metal-assisted chemical (MAC) etching process to get a conformal antireflective property on the iris 3D structure including sharp tips and sidewalls. A significant reduction in undesirable light stray reflections was achieved as a result of successful implementation of the conformal antireflective surface on all facets of fabricated irises to eliminate undesirable light stray reflections.

Theory of dispersive microlenses

NASA Technical Reports Server (NTRS)

Herman, B.; Gal, George

1993-01-01

A dispersive microlens is a miniature optical element which simultaneously focuses and disperses light. Arrays of dispersive mircolenses have potential applications in multicolor focal planes. They have a 100 percent optical fill factor and can focus light down to detectors of diffraction spot size, freeing up areas on the focal plane for on-chip analog signal processing. Use of dispersive microlenses allows inband color separation within a pixel and perfect scene registration. A dual-color separation has the potential for temperature discrimination. We discuss the design of dispersive microlenses and present sample results for efficient designs.

Shack-Hartmann wavefront sensor using a Raspberry Pi embedded system

NASA Astrophysics Data System (ADS)

Contreras-Martinez, Ramiro; Garduño-Mejía, Jesús; Rosete-Aguilar, Martha; Román-Moreno, Carlos J.

2017-05-01

In this work we present the design and manufacture of a compact Shack-Hartmann wavefront sensor using a Raspberry Pi and a microlens array. The main goal of this sensor is to recover the wavefront of a laser beam and to characterize its spatial phase using a simple and compact Raspberry Pi and the Raspberry Pi embedded camera. The recovery algorithm is based on a modified version of the Southwell method and was written in Python as well as its user interface. Experimental results and reconstructed wavefronts are presented.

Study of UV surface plasmons on metallic nanostructures and its applications to nanophotonics

NASA Astrophysics Data System (ADS)

Zhou, Liangcheng

Modern nanotechnology requires the characterization ability in the order of 100 nm or smaller. This resolution requirement cannot be met by using conventional optical microscopy. Nowadays, the mainstream technique that is universally adopted to characterize optical properties on this length scale is Near-field Scanning Optical Microscopy (NSOM). In the effort to improve the resolution and efficiency of NSOM techniques, both nanoscopic fabrication and imaging techniques are critical because the light field strongly intereacts with the metallic NSOM probe or other surfaces to form surface plasmons (SPs). However, much is still unknown about the behavior of light interacting with metallic nanostructures. This calls for research that develops the tool set, methodology and that includes both experimental characterization, and numerical simulations, for the investigation of SPs. The short wavelength of UV light makes it particularly desirable for many industrial processes. So far, little research has been carried out to understand surface plasmon in the UV spectral region. Like conventional optics, UV SPs have unique properties and optical behavior. For this purpose, we modified our existing NSOM into a Photon Scanning Tunneling Microscope (PTSM) and demonstrate its power for the imaging of UV SPs. We present what we believe to be the first direct mapping of the UV SPs on an Al2O3/Al surface. UV SP modes launched by one-dimensional slits or two-dimensional groove arrays and corresponding interference phenomenon were both observed. We then use the same methodology in the engineering of optimized nano aperture such as UV bowtie nanoantenna. For the latter, we find a strong UV intensity profile which is localized to less than 50nm caused by a localized surface plasmon resonance. The relationship of optical field enhancement and antenna geometric shape is studied using numerical simulations and NSOM experiments. In another project, we examine the propagation of light from near-field to far-field. For that purpose, a micro-lens with bull's-eye ring structure, similar to a Fresnel zone plate, is fabricated. We mapped the far-field light distribution from the micro-lens' output by using confocal microscope, which shows that this ring structure exhibit focusing ability as well. Furthermore, we study the ultraviolet (UV) extraordinary optical transmission through nanoslit structures into the far field as well as the localized field enhancement in the near field. The experimental results are compared to numerical modeling results showing good agreement.

Bio-microfluidics: biomaterials and biomimetic designs.

PubMed

Domachuk, Peter; Tsioris, Konstantinos; Omenetto, Fiorenzo G; Kaplan, David L

2010-01-12

Bio-microfluidics applies biomaterials and biologically inspired structural designs (biomimetics) to microfluidic devices. Microfluidics, the techniques for constraining fluids on the micrometer and sub-micrometer scale, offer applications ranging from lab-on-a-chip to optofluidics. Despite this wealth of applications, the design of typical microfluidic devices imparts relatively simple, laminar behavior on fluids and is realized using materials and techniques from silicon planar fabrication. On the other hand, highly complex microfluidic behavior is commonplace in nature, where fluids with nonlinear rheology flow through chaotic vasculature composed from a range of biopolymers. In this Review, the current state of bio-microfluidic materials, designs and applications are examined. Biopolymers enable bio-microfluidic devices with versatile functionalization chemistries, flexibility in fabrication, and biocompatibility in vitro and in vivo. Polymeric materials such as alginate, collagen, chitosan, and silk are being explored as bulk and film materials for bio-microfluidics. Hydrogels offer options for mechanically functional devices for microfluidic systems such as self-regulating valves, microlens arrays and drug release systems, vital for integrated bio-microfluidic devices. These devices including growth factor gradients to study cell responses, blood analysis, biomimetic capillary designs, and blood vessel tissue culture systems, as some recent examples of inroads in the field that should lead the way in a new generation of microfluidic devices for bio-related needs and applications. Perhaps one of the most intriguing directions for the future will be fully implantable microfluidic devices that will also integrate with existing vasculature and slowly degrade to fully recapitulate native tissue structure and function, yet serve critical interim functions, such as tissue maintenance, drug release, mechanical support, and cell delivery.

Micro-optic lens for data storage

NASA Technical Reports Server (NTRS)

Milster, T. D.; Trusty, R. M.; Wang, M. S.; Froehlich, F. F.; Erwin, J. Kevin

1991-01-01

A new type of microlens for data storage applications that has improved off-axis performance is described. The lens consists of a micro Fresnel pattern on a curved substrate. The radius of the substrate is equal to the focal length of the lens. If the pattern and substrate are thin, the combination satisfies the Abbe sine condition. Therefore, the lens is free of coma. We analyze a 0.5 numerical aperture, 0.50 mm focal length lens in detail. A 0.16 numerical aperture lens was fabricated holographically, and results are presented.

Electrowetting Controlled Tunable Liquid Microlens

NASA Astrophysics Data System (ADS)

Krupenkin, Tom; Yang, Shu

2002-03-01

Electrowetting potentially provides a convenient way to control the shape and position of the liquid droplet on a rigid substrate. However, the effectiveness of this method relies strongly on the precise control of the surface properties of the substrate. Here we present a tunable liquid microlens capable of adjusting the position of its focal spot in all three dimensions. The microlens consists of a droplet of a transparent conductive liquid placed on a dielectric substrate with a hydrophobic coating. By varying the voltage applied to the structure, both the position and the curvature of the microlens can be changed. The influence of the bulk and surface properties of the materials on the microlens behavior is experimentally investigated and supported by theoretical calculations. Some of the potential problems associated with the stick-slip behavior and contact angle hysteresis are outlined and possible ways to prevent them are suggested.

Full-field swept-source optical coherence tomography with phase-shifting techniques for skin cancer detection

NASA Astrophysics Data System (ADS)

Krauter, J.; Boettcher, T.; Körner, K.; Gronle, M.; Osten, W.; Passilly, N.; Froehly, L.; Perrin, S.; Gorecki, C.

2015-05-01

The EU-funded project VIAMOS1 proposes an optical coherence tomography system (OCT) for skin cancer detection, which combines full-field and full-range swept-source OCT in a multi-channel sensor for parallel detection. One of the project objectives is the development of new fabrication technologies for micro-optics, which makes it compatible to Micro-Opto-Electromechanical System technology (MOEMS). The basic system concept is a wafer-based Mirau interferometer array with an actuated reference mirror, which enables phase shifted interferogram detection and therefore reconstruction of the complex phase information, resulting in a higher measurement range with reduced image artifacts. This paper presents an experimental one-channel on-bench OCT system with bulk optics, which serves as a proof-of-concept setup for the final VIAMOS micro-system. It is based on a Linnik interferometer with a wavelength tuning light source and a camera for parallel A-Scan detection. Phase shifting interferometry techniques (PSI) are used for the suppression of the complex conjugate artifact, whose suppression reaches 36 dB. The sensitivity of the system is constant over the full-field with a mean value of 97 dB. OCT images are presented of a thin membrane microlens and a biological tissue (onion) as a preliminary demonstration.

Microlens array induced light absorption enhancement in polymer solar cells

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Yuqing; Elshobaki, Moneim; Ye, Zhuo

2013-01-24

Over the last decade, polymer solar cells (PSCs) have attracted a lot of attention and highest power conversion efficiencies (PCE) are now close to 10%. Here we employ an optical structure – the microlens array (MLA) – to increase light absorption inside the active layer, and PCE of PSCs increased even for optimized devices. Normal incident light rays are refracted at the MLA and travel longer optical paths inside the active layers. Two PSC systems – poly(3-hexylthiophene-2,5-diyl):(6,6)-phenyl C61 butyric acid methyl ester (P3HT:PCBM) and poly[[9-(1-octylnonyl)-9H-carbazole-2,7-diyl]-2,5-thiophenediyl-2,1,3-benzothiadiazole-4,7-diyl-2,5-thiophenediyl]:(6,6)-phenyl C71 butyric acid methyl ester (PCDTBT:PC70BM) – were investigated. In the P3HT:PCBM system, MLA increasedmore » the absorption, absolute external quantum efficiency, and the PCE of an optimized device by [similar]4.3%. In the PCDTBT:PC70BM system, MLA increased the absorption, absolute external quantum efficiency, and PCE by more than 10%. In addition, simulations incorporating optical parameters of all structural layers were performed and they support the enhancement of absorption in the active layer with the assistance of MLA. Our results show that utilizing MLA is an effective strategy to further increase light absorption in PSCs, in which optical losses account for [similar]40% of total losses. MLA also does not pose materials processing challenges to the active layers since it is on the other side of the transparent substrate.« less

Micro-Optic Color Separation Technology for Efficient Projection Displays

NASA Technical Reports Server (NTRS)

Gunning, W. J.; Boehmer, E.

1997-01-01

Phase 1 of this project focused on development of an overall optical concept which incorporated a single liquid crystal spatial light modulator. The system achieved full color by utilizing an echelon grating, which diffracted the incident light into three orders with different color spectra, in combination with a microlens array, which spatially separated RGB bands and directed the light of the appropriate wavelength to the appropriate color dot. Preliminary echelon grating designs were provided by MIT/LL and reviewed by Rockwell. Additional Rockwell activities included the Identification of microlens designs, light sources (ILC), and projection optics to fulfill the overall design requirements. An Internal subcontract was established with Rockwell's Collins Avionics and Communications Division (CACD) which specified the liquid crystal SLM (Sharp Model No. LQ 46EO2) and built the projection display baseline projector. Full Color projected video images were produced and shown at the 1995 HDS meeting in Washington. Analysis of the luminance performance of the projector and detailed parameter trade studies helped define the dependence of overall display efficiency on lamp collimation, and indicated that a lamp with very small arc dimension is required for the optical concept to be viable.

Development and investigation of a magnetic resonance imaging-compatible microlens-based optical detector

NASA Astrophysics Data System (ADS)

Paar, Steffen; Umathum, Reiner; Jiang, Xiaoming; Majer, Charles L.; Peter, Jörg

2015-09-01

A noncontact optical detector for in vivo imaging has been developed that is compatible with magnetic resonance imaging (MRI). The optical detector employs microlens arrays and might be classified as a plenoptic camera. As a resulting of its design, the detector possesses a slim thickness and is self-shielding against radio frequency (RF) pulses. For experimental investigation, a total of six optical detectors were arranged in a cylindrical fashion, with the imaged object positioned in the center of this assembly. A purposely designed RF volume resonator coil has been developed and is incorporated within the optical imaging system. The whole assembly was placed into the bore of a 1.5 T patient-sized MRI scanner. Simple-geometry phantom studies were performed to assess compatibility and performance characteristics regarding both optical and MR imaging systems. A bimodal ex vivo nude mouse measurement was conducted. From the MRI data, the subject surface was extracted. Optical images were projected on this surface by means of an inverse mapping algorithm. Simultaneous measurements did not reveal influences from the magnetic field and RF pulses onto optical detector performance (spatial resolution, sensitivity). No significant influence of the optical imaging system onto MRI performance was detectable.

Development and investigation of a magnetic resonance imaging-compatible microlens-based optical detector.

PubMed

Paar, Steffen; Umathum, Reiner; Jiang, Xiaoming; Majer, Charles L; Peter, Jörg

2015-09-01

A noncontact optical detector for in vivo imaging has been developed that is compatible with magnetic resonance imaging (MRI). The optical detector employs microlens arrays and might be classified as a plenoptic camera. As a resulting of its design, the detector possesses a slim thickness and is self-shielding against radio frequency (RF) pulses. For experimental investigation, a total of six optical detectors were arranged in a cylindrical fashion, with the imaged object positioned in the center of this assembly. A purposely designed RF volume resonator coil has been developed and is incorporated within the optical imaging system. The whole assembly was placed into the bore of a 1.5 T patient-sized MRI scanner. Simple-geometry phantom studies were performed to assess compatibility and performance characteristics regarding both optical and MR imaging systems. A bimodal ex vivo nude mouse measurement was conducted. From the MRI data, the subject surface was extracted. Optical images were projected on this surface by means of an inverse mapping algorithm. Simultaneous measurements did not reveal influences from the magnetic field and RF pulses onto optical detector performance (spatial resolution, sensitivity). No significant influence of the optical imaging system onto MRI performance was detectable.

Design and characterization of dielectric subwavelength focusing lens with polarization dependence

NASA Astrophysics Data System (ADS)

Kim, Sung W.; Pang, Lin; Fainman, Yeshaiahu

2016-03-01

We introduce and develop design, fabrication and characterization methodology for engineering the effective refractive index of a composite dielectric planar surface created by controlling the density of deeply subwavelength low index nanoholes (e.g., air) in a high index dielectric layer (e.g., Si). The nanoscale properties of a composite dielectric layer allows for full control of the optical wavefront phase by designing arbitrary space-variant refractive index profiles. We present the composite dielectric metasurface microlens exploiting symmetric design to achieve polarization invariant impulse response, and use asymmetric design to demonstrate polarization sensitive impulse response of the lens. This composite dielectric layers lenses were fabricated by patterning nanohole distributions on a dielectric surface and etching to submicron depths. Our dielectric microlens with asymmetric distribution of neff (neff x ≠ neff y) demonstrates a graded index lens with polarization dependent focusing with of 32um and 22 um for linearly x- and y-polarized light, respectively operating at a wavelength of λ = 1550nm. We also show numerically and demonstrate experimentally achromatic performance of the devices operating in the wavelength range of 1500nm - 1900nm with FWHM of the focal spots of about 4um. Namely, we have constructed a graded index lens that can overcome diffraction effects even when aperture/wavelength (D/λ) is smaller than 40. The demonstrated novel approach to engineer dielectric composite nanosurfaces has the potential to realize arbitrary phase functions with minimal insertion loss, submicron thickness and miniaturization to reduce element size and weight, and may have a significant impact on numerous miniature imaging systems applications.

SPACE-BASED MICROLENS PARALLAX OBSERVATION AS A WAY TO RESOLVE THE SEVERE DEGENERACY BETWEEN MICROLENS-PARALLAX AND LENS-ORBITAL EFFECTS

DOE Office of Scientific and Technical Information (OSTI.GOV)

Han, C.; Udalski, A.; Szymański, M. K.

In this paper, we demonstrate the severity of the degeneracy between the microlens-parallax and lens-orbital effects by presenting the analysis of the gravitational binary-lens event OGLE-2015-BLG-0768. Despite the obvious deviation from the model based on the linear observer motion and the static binary, it is found that the residual can be almost equally well explained by either the parallactic motion of the Earth or the rotation of the binary-lens axis, resulting in the severe degeneracy between the two effects. We show that the degeneracy can be readily resolved with the additional data provided by space-based microlens parallax observations. By enablingmore » us to distinguish between the two higher-order effects, space-based microlens parallax observations will not only make it possible to accurately determine the physical lens parameters but also to further constrain the orbital parameters of binary lenses.« less

Opto-mechanical analysis of nonlinear elastomer membrane deformation under hydraulic pressure for variable-focus liquid-filled microlenses.

PubMed

Choi, Seung Tae; Son, Byeong Soo; Seo, Gye Won; Park, Si-Young; Lee, Kyung-Sick

2014-03-10

Nonlinear large deformation of a transparent elastomer membrane under hydraulic pressure was analyzed to investigate its optical performance for a variable-focus liquid-filled membrane microlens. In most membrane microlenses, actuators control the hydraulic pressure of optical fluid so that the elastomer membrane together with the internal optical fluid changes its shape, which alters the light path of the microlens to adapt its optical power. A fluid-structure interaction simulation was performed to estimate the transient behavior of the microlens under the operation of electroactive polymer actuators, demonstrating that the viscosity of the optical fluid successfully stabilizes the fluctuations within a fairly short period of time during dynamic operations. Axisymmetric nonlinear plate theory was used to calculate the deformation profile of the membrane under hydrostatic pressure, with which optical characteristics of the membrane microlens were estimated. The effects of gravitation and viscoelastic behavior of the elastomer membrane on the optical performance of the membrane microlens were also evaluated with finite element analysis.

Numerical simulation for meniscus shape and optical performance of a MEMS-based liquid micro-lens.

PubMed

Lee, Shong-Leih; Yang, Chao-Fu

2008-11-24

It is very difficult to fabricate tunable optical systems having an aperture below 1000 micrometers with the conventional means on macroscopic scale. Krogmann et al. (J. Opt. A 8, S330-S336, 2006) presented a MEMS-based tunable liquid micro-lens system with an aperture of 300 micrometers. The system exhibited a tuning range of back focal length between 2.3mm and infinity by using the electrowetting effect to change the contact angle of the meniscus shape on silicon with a voltage of 0-45 V. However, spherical aberration was found in their lens system. In the present study, a numerical simulation is performed for this same physical configuration by solving the Young-Laplace equation on the interface of the lens liquid and the surrounding liquid. The resulting meniscus shape produces a back focal length that agrees with the experimental observation excellently. To eliminate the spherical aberration, an electric field is applied on the lens. The electric field alters the Young-Laplace equation and thus changes the meniscus shape and the lens quality. The numerical result shows that the spherical aberration of the lens can be essentially eliminated when a proper electric field is applied.

Method for fabrication of cylindrical microlenses of selected shape

DOEpatents

Snyder, J.J.; Baer, T.M.

1992-01-14

The present invention provides a diffraction limited, high numerical aperture (fast) cylindrical microlens. The method for making the microlens is adaptable to produce a cylindrical lens that has almost any shape on its optical surfaces. The cylindrical lens may have a shape, such as elliptical or hyperbolic, designed to transform some particular given input light distribution into some desired output light distribution. In the method, the desired shape is first formed in a glass preform. Then, the preform is heated to the minimum drawing temperature and a fiber is drawn from it. The cross-sectional shape of the fiber bears a direct relation to the shape of the preform from which it was drawn. During the drawing process, the surfaces become optically smooth due to fire polishing. The present invention has many applications, such as integrated optics, optical detectors and laser diodes. The lens, when connected to a laser diode bar, can provide a high intensity source of laser radiation for pumping a high average power solid state laser. In integrated optics, a lens can be used to couple light into and out of apertures such as waveguides. The lens can also be used to collect light, and focus it on a detector. 11 figs.

Method for fabrication of cylindrical microlenses of selected shape

DOEpatents

Snyder, James J.; Baer, Thomas M.

1992-01-01

The present invention provides a diffraction limited, high numerical aperture (fast) cylindrical microlens. The method for making the microlens is adaptable to produce a cylindrical lens that has almost any shape on its optical surfaces. The cylindrical lens may have a shape, such as elliptical or hyperbolic, designed to transform some particular given input light distribution into some desired output light distribution. In the method, the desired shape is first formed in a glass preform. Then, the preform is heated to the minimum drawing temperature and a fiber is drawn from it. The cross-sectional shape of the fiber bears a direct relation to the shape of the preform from which it was drawn. During the drawing process, the surfaces become optically smooth due to fire polishing. The present invention has many applications, such as integrated optics, optical detectors and laser diodes. The lens, when connected to a laser diode bar, can provide a high intensity source of laser radiation for pumping a high average power solid state laser. In integrated optics, a lens can be used to couple light into and out of apertures such as waveguides. The lens can also be used to collect light, and focus it on a detector.

Full-frame, programmable hyperspectral imager

DOE Office of Scientific and Technical Information (OSTI.GOV)

Love, Steven P.; Graff, David L.

A programmable, many-band spectral imager based on addressable spatial light modulators (ASLMs), such as micro-mirror-, micro-shutter- or liquid-crystal arrays, is described. Capable of collecting at once, without scanning, a complete two-dimensional spatial image with ASLM spectral processing applied simultaneously to the entire image, the invention employs optical assemblies wherein light from all image points is forced to impinge at the same angle onto the dispersing element, eliminating interplay between spatial position and wavelength. This is achieved, as examples, using telecentric optics to image light at the required constant angle, or with micro-optical array structures, such as micro-lens- or capillary arrays,more » that aim the light on a pixel-by-pixel basis. Light of a given wavelength then emerges from the disperser at the same angle for all image points, is collected at a unique location for simultaneous manipulation by the ASLM, then recombined with other wavelengths to form a final spectrally-processed image.« less

Multifocus confocal Raman microspectroscopy for fast multimode vibrational imaging of living cells.

PubMed

Okuno, Masanari; Hamaguchi, Hiro-o

2010-12-15

We have developed a multifocus confocal Raman microspectroscopic system for the fast multimode vibrational imaging of living cells. It consists of an inverted microscope equipped with a microlens array, a pinhole array, a fiber bundle, and a multichannel Raman spectrometer. Forty-eight Raman spectra from 48 foci under the microscope are simultaneously obtained by using multifocus excitation and image-compression techniques. The multifocus confocal configuration suppresses the background generated from the cover glass and the cell culturing medium so that high-contrast images are obtainable with a short accumulation time. The system enables us to obtain multimode (10 different vibrational modes) vibrational images of living cells in tens of seconds with only 1 mW laser power at one focal point. This image acquisition time is more than 10 times faster than that in conventional single-focus Raman microspectroscopy.

Modified plenoptic camera for phase and amplitude wavefront sensing

NASA Astrophysics Data System (ADS)

Wu, Chensheng; Davis, Christopher C.

2013-09-01

Shack-Hartmann sensors have been widely applied in wavefront sensing. However, they are limited to measuring slightly distorted wavefronts whose local tilt doesn't surpass the numerical aperture of its micro-lens array and cross talk of incident waves on the mrcro-lens array should be strictly avoided. In medium to strong turbulence cases of optic communication, where large jitter in angle of arrival and local interference caused by break-up of beam are common phenomena, Shack-Hartmann sensors no longer serve as effective tools in revealing distortions in a signal wave. Our design of a modified Plenoptic Camera shows great potential in observing and extracting useful information from severely disturbed wavefronts. Furthermore, by separating complex interference patterns into several minor interference cases, it may also be capable of telling regional phase difference of coherently illuminated objects.

Microlens performance limits in sub-2mum pixel CMOS image sensors.

PubMed

Huo, Yijie; Fesenmaier, Christian C; Catrysse, Peter B

2010-03-15

CMOS image sensors with smaller pixels are expected to enable digital imaging systems with better resolution. When pixel size scales below 2 mum, however, diffraction affects the optical performance of the pixel and its microlens, in particular. We present a first-principles electromagnetic analysis of microlens behavior during the lateral scaling of CMOS image sensor pixels. We establish for a three-metal-layer pixel that diffraction prevents the microlens from acting as a focusing element when pixels become smaller than 1.4 microm. This severely degrades performance for on and off-axis pixels in red, green and blue color channels. We predict that one-metal-layer or backside-illuminated pixels are required to extend the functionality of microlenses beyond the 1.4 microm pixel node.

Collection Mode Lens System

DOEpatents

Fletcher, Daniel A.; Kino, Gordon S.

2002-11-05

A lens system including a collection lens and a microlens spaced from the collection lens adjacent the region to be observed. The diameter of the observablel region depends substantially on the radius of the microlens.

A superior architecture of brightness enhancement for display backlighting

NASA Astrophysics Data System (ADS)

Dross, Oliver; Parkyn, William A.; Chaves, Julio; Falicoff, Waqidi; Miñano, Juan Carlos; Benitez, Pablo; Alvarez, Roberto

2006-08-01

Brightness enhancement of backlighting for displays is typically achieved via crossed micro prismatic films that are introduced between a backlight unit and a transmissive (LCD) display. Prismatic films let pass light only into a restricted angular range, while, in conjunction with other reflective elements below the backlight, all other light is recycled within the backlight unit, thereby increasing the backlight luminance. This design offers no free parameters to influence the resulting light distribution and suffers from insufficient stray light control. A novel strategy of light recycling is introduced, using a microlens array in conjunction with a hole array in a reflective surface, that can provide higher luminance, superior stray light control, and can be designed to meet almost any desired emission pattern. Similar strategies can be applied to mix light from different colored LEDs being mounted upside down to shine into a backlight unit.

2D-3D switchable display based on a passive polymeric lenticular lens array and electrically suppressed ferroelectric liquid crystal.

PubMed

Shi, Liangyu; Srivastava, Abhishek Kumar; Wai Tam, Alwin Ming; Chigrinov, Vladimir Grigorievich; Kwok, Hoi Sing

2017-09-01

We reveal a 2D-3D switchable lens unit that is based on a polarization-sensitive microlens array and a polarization selector unit made of an electrically suppressed helix ferroelectric liquid crystal (ESHFLC) cell. The ESHFLCs offer a high contrast ratio (∼10k∶1) between the crossed polarizers at a low applied electric field (∼1.7  V/μm) with a small switching time (<50  μs). A special driving scheme, to switch between a 2D and 3D mode, has been developed to avoid unwanted issues related to DC accumulation in the ferroelectric liquid crystal without affecting its optical quality. The proposed lens unit is characterized by low power consumption, ultrafast response, and 3D crosstalk <5%, and can therefore find application in TVs, cell phones, etc.

Light field imaging and application analysis in THz

NASA Astrophysics Data System (ADS)

Zhang, Hongfei; Su, Bo; He, Jingsuo; Zhang, Cong; Wu, Yaxiong; Zhang, Shengbo; Zhang, Cunlin

2018-01-01

The light field includes the direction information and location information. Light field imaging can capture the whole light field by single exposure. The four-dimensional light field function model represented by two-plane parameter, which is proposed by Levoy, is adopted in the light field. Acquisition of light field is based on the microlens array, camera array and the mask. We calculate the dates of light-field to synthetize light field image. The processing techniques of light field data include technology of refocusing rendering, technology of synthetic aperture and technology of microscopic imaging. Introducing the technology of light field imaging into THz, the efficiency of 3D imaging is higher than that of conventional THz 3D imaging technology. The advantages compared with visible light field imaging include large depth of field, wide dynamic range and true three-dimensional. It has broad application prospects.

Improving depth estimation from a plenoptic camera by patterned illumination

NASA Astrophysics Data System (ADS)

Marshall, Richard J.; Meah, Chris J.; Turola, Massimo; Claridge, Ela; Robinson, Alex; Bongs, Kai; Gruppetta, Steve; Styles, Iain B.

2015-05-01

Plenoptic (light-field) imaging is a technique that allows a simple CCD-based imaging device to acquire both spatially and angularly resolved information about the "light-field" from a scene. It requires a microlens array to be placed between the objective lens and the sensor of the imaging device1 and the images under each microlens (which typically span many pixels) can be computationally post-processed to shift perspective, digital refocus, extend the depth of field, manipulate the aperture synthetically and generate a depth map from a single image. Some of these capabilities are rigid functions that do not depend upon the scene and work by manipulating and combining a well-defined set of pixels in the raw image. However, depth mapping requires specific features in the scene to be identified and registered between consecutive microimages. This process requires that the image has sufficient features for the registration, and in the absence of such features the algorithms become less reliable and incorrect depths are generated. The aim of this study is to investigate the generation of depth-maps from light-field images of scenes with insufficient features for accurate registration, using projected patterns to impose a texture on the scene that provides sufficient landmarks for the registration methods.

Simulation of the effect of incline incident angle in DMD Maskless Lithography

NASA Astrophysics Data System (ADS)

Liang, L. W.; Zhou, J. Y.; Xiang, L. L.; Wang, B.; Wen, K. H.; Lei, L.

2017-06-01

The aim of this study is to provide a simulation method for investigation of the intensity fluctuation caused by the inclined incident angle in DMD (digital micromirror device) maskless lithography. The simulation consists of eight main processes involving the simplification of the DMD aperture function and light propagation utilizing the non-parallel angular spectrum method. These processes provide a possibility of co-simulation in the spatial frequency domain, which combines the microlens array and DMD in the maskless lithography system. The simulation provided the spot shape and illumination distribution. These two parameters are crucial in determining the exposure dose in the existing maskless lithography system.

Depth estimation using a lightfield camera

NASA Astrophysics Data System (ADS)

Roper, Carissa

The latest innovation to camera design has come in the form of the lightfield, or plenoptic, camera that captures 4-D radiance data rather than just the 2-D scene image via microlens arrays. With the spatial and angular light ray data now recorded on the camera sensor, it is feasible to construct algorithms that can estimate depth of field in different portions of a given scene. There are limitations to the precision due to hardware structure and the sheer number of scene variations that can occur. In this thesis, the potential of digital image analysis and spatial filtering to extract depth information is tested on the commercially available plenoptic camera.

PDSM characterization for fabrication of free-space OXC optical components

NASA Astrophysics Data System (ADS)

Argueta, Victor; Fitzpatrick, Brianna

2017-11-01

In 2007 Dr Khine et al published a paper where they presented a technique using thermoplastics and PDMS to create microfluidic patterns1. Their technique involves printing a pattern in a polystyrene sheet using a laser printer. Once the pattern is transfer the polystyrene sheets they are heated to reduce their size. By printing the same pattern of the plastic sheets before heating, it is possible to control the height up to 80 μm and the width as thin as 65 μm1, 2. This technique is attractive to be used in optical fabrication due to its versatility, low cost and fast prototyping. However, in order to fabricate optical systems, we will need to control the refractive index of PDMS to allow design of basic optical components like waveguides, beam splitter, or diffuse reflectors; or more complex structures like interferometers, optical microfluidic lab-on-chip, micro-lens arrays. Several techniques exist to control the refractive index for PDMS either by controlling the curing temperature, the ratio between the base and curing agent, or by curing using UV light3-5. In this paper, we present the changes on refractive index by changing the curing temperature for different base/reaction agent ratios. We then apply these results to fabricate an optical component for a free-space optical cross-connect (OXC). Optical cross-connects are an important network element for constructing the next generation of optical networks, where provisioning (reconfiguration), scalability, and fast restoration will be needed6-8. The main attraction of all-optical switching is that it enables routing of optical data signals without the need for conversion to electrical signals, and therefore, is independent of data rate and data protocols. We have proposed previously9, 11 a new approach for an OXC. Our architecture is a free-space 3-D while still using digital MEMS. Our system is based on the optical White cell12, which consists of three spherical mirrors among which light can circulate. In Section II, we will briefly mention the basic characteristics of the binary White cell OXC configuration. Section III we will introduce the changes induced on curing PDMS, our SDD design and its fabrication for two different beam displacements. Finally, in Section IV, we will present the summary and conclusions of our work.

Fiber IFU unit for the second generation VLT spectrograph KMOS

NASA Astrophysics Data System (ADS)

Tomono, Daigo; Weisz, Harald; Hofmann, Reiner

2003-03-01

KMOS is a cryogenic multi-object near-infrared spectrograph for the VLT. It will be equipped with about 20 deployable integral field units (IFUs) which can be positioned anywhere in the 7.2 arcmin diameter field o the VLT Nasmyth focus by a cryogenic robot. We describe IFUs using micro lens arrays and optical fibers to arrange the two-dimensional fields from the IFUs on the spectrograph entrance slit. Each micro-lens array is mounted in a spider arm which also houses the pre-optics with a cold stop. The spider arms are positioned by a cryogenic robot which is built around the image plane. For the IFUs, two solutions are considered: monolithic mirco-lens arrays with fibers attached to the back where the entrance pupil is imaged, and tapered fibers with integrated lenses which are bundled together to form a lens array. The flexibility of optical fibers relaxes boundary conditions for integration of the instrument components. On the other hand, FRD and geometric characteristics of optical fibers leads to higher AΩ accepted by the spectrograph. Conceptual design of the instrument is presented as well as advantages and disadvantages of the fiber IFUs.

Parallel, confocal, and complete spectrum imager for fluorescent detection of high-density microarray

NASA Astrophysics Data System (ADS)

Bogdanov, Valery L.; Boyce-Jacino, Michael

1999-05-01

Confined arrays of biochemical probes deposited on a solid support surface (analytical microarray or 'chip') provide an opportunity to analysis multiple reactions simultaneously. Microarrays are increasingly used in genetics, medicine and environment scanning as research and analytical instruments. A power of microarray technology comes from its parallelism which grows with array miniaturization, minimization of reagent volume per reaction site and reaction multiplexing. An optical detector of microarray signals should combine high sensitivity, spatial and spectral resolution. Additionally, low-cost and a high processing rate are needed to transfer microarray technology into biomedical practice. We designed an imager that provides confocal and complete spectrum detection of entire fluorescently-labeled microarray in parallel. Imager uses microlens array, non-slit spectral decomposer, and high- sensitive detector (cooled CCD). Two imaging channels provide a simultaneous detection of localization, integrated and spectral intensities for each reaction site in microarray. A dimensional matching between microarray and imager's optics eliminates all in moving parts in instrumentation, enabling highly informative, fast and low-cost microarray detection. We report theory of confocal hyperspectral imaging with microlenses array and experimental data for implementation of developed imager to detect fluorescently labeled microarray with a density approximately 103 sites per cm2.

Design and fabrication of microstrip antenna arrays

NASA Technical Reports Server (NTRS)

1978-01-01

A microstrip array project was conducted to demonstrate the feasibility of designing and fabricating simple, low cost, low sidelobe phased arrays with circular disk microstrip radiating elements. Design data were presented for microstrip elements and arrays including the effects of the protective covers, the mutual interaction between elements, and stripline feed network design. Low cost multilayer laminate fabrication techniques were also investigated. Utilizing this design data two C-band low sidelobe arrays were fabricated and tested: an eight-element linear and a sixty-four element planar array. These arrays incorporated stripline Butler matrix feed networks to produce a low sidelobe broadside beam.

Refractive multiple optical tweezers for parallel biochemical analysis in micro-fluidics

NASA Astrophysics Data System (ADS)

Merenda, Fabrice; Rohner, Johann; Pascoal, Pedro; Fournier, Jean-Marc; Vogel, Horst; Salathé, René-Paul

2007-02-01

We present a multiple laser tweezers system based on refractive optics. The system produces an array of 100 optical traps thanks to a refractive microlens array, whose focal plane is imaged into the focal plane of a high-NA microscope objective. This refractive multi-tweezers system is combined to micro-fluidics, aiming at performing simultaneous biochemical reactions on ensembles of free floating objects. Micro-fluidics allows both transporting the particles to the trapping area, and conveying biochemical reagents to the trapped particles. Parallel trapping in micro-fluidics is achieved with polystyrene beads as well as with native vesicles produced from mammalian cells. The traps can hold objects against fluid flows exceeding 100 micrometers per second. Parallel fluorescence excitation and detection on the ensemble of trapped particles is also demonstrated. Additionally, the system is capable of selectively and individually releasing particles from the tweezers array using a complementary steerable laser beam. Strategies for high-yield particle capture and individual particle release in a micro-fluidic environment are discussed. A comparison with diffractive optical tweezers enhances the pros and cons of refractive systems.

Synchromodal optical in vivo imaging employing microlens array optics: a complete framework

NASA Astrophysics Data System (ADS)

Peter, Joerg

2013-03-01

A complete mathematical framework for preclinical optical imaging (OI) support comprising bioluminescence imaging (BLI), fluorescence surface imaging (FSI) and fluorescence optical tomography (FOT) is presented in which optical data is acquired by means of a microlens array (MLA) based light detector (MLA-D). The MLA-D has been developed to enable unique OI, especially in synchromodal operation with secondary imaging modalities (SIM) such as positron emission tomography (PET) or magnetic resonance imaging (MRI). An MLA-D consists of a (large-area) photon sensor array, a matched MLA for field-of-view definition, and a septum mask of specific geometry made of anodized aluminum that is positioned between the sensor and the MLA to suppresses light cross-talk and to shield the sensor's radiofrequency interference signal (essential when used inside an MRI system). The software framework, while freely parameterizable for any MLA-D, is tailored towards an OI prototype system for preclinical SIM application comprising a multitude of cylindrically assembled, gantry-mounted, simultaneously operating MLA-D's. Besides the MLA-D specificity, the framework incorporates excitation and illumination light-source declarations of large-field and point geometry to facilitate multispectral FSI and FOT as well as three-dimensional object recognition. When used in synchromodal operation, reconstructed tomographic SIM volume data can be used for co-modal image fusion and also as a prior for estimating the imaged object's 3D surface by means of gradient vector flow. Superimposed planar (without object prior) or surface-aligned inverse mapping can be performed to estimate and to fuse the emission light map with the boundary of the imaged object. Triangulation and subsequent optical reconstruction (FOT) or constrained flow estimation (BLI), both including the possibility of SIM priors, can be performed to estimate the internal three-dimensional emission light distribution. The framework is susceptible to a number of variables controlling convergence and computational speed. Utilization and performance is illustrated on experimentally acquired data employing the OI prototype system in stand-alone operation, and when integrated into an unmodified preclinical PET system performing synchromodal BLI-PET in vivo imaging.

A 65k pixel, 150k frames-per-second camera with global gating and micro-lenses suitable for fluorescence lifetime imaging

NASA Astrophysics Data System (ADS)

Burri, Samuel; Powolny, François; Bruschini, Claudio E.; Michalet, Xavier; Regazzoni, Francesco; Charbon, Edoardo

2014-05-01

This paper presents our work on a 65k pixel single-photon avalanche diode (SPAD) based imaging sensor realized in a 0.35μm standard CMOS process. At a resolution of 512 by 128 pixels the sensor is read out in 6.4μs to deliver over 150k monochrome frames per second. The individual pixel has a size of 24μm2 and contains the SPAD with a 12T quenching and gating circuitry along with a memory element. The gating signals are distributed across the chip through a balanced tree to minimize the signal skew between the pixels. The array of pixels is row-addressable and data is sent out of the chip on 128 lines in parallel at a frequency of 80MHz. The system is controlled by an FPGA which generates the gating and readout signals and can be used for arbitrary real-time computation on the frames from the sensor. The communication protocol between the camera and a conventional PC is USB2. The active area of the chip is 5% and can be significantly improved with the application of a micro-lens array. A micro-lens array, for use with collimated light, has been designed and its performance is reviewed in the paper. Among other high-speed phenomena the gating circuitry capable of generating illumination periods shorter than 5ns can be used for Fluorescence Lifetime Imaging (FLIM). In order to measure the lifetime of fluorophores excited by a picosecond laser, the sensor's illumination period is synchronized with the excitation laser pulses. A histogram of the photon arrival times relative to the excitation is then constructed by counting the photons arriving during the sensitive time for several positions of the illumination window. The histogram for each pixel is transferred afterwards to a computer where software routines extract the lifetime at each location with an accuracy better than 100ps. We show results for fluorescence lifetime measurements using different fluorophores with lifetimes ranging from 150ps to 5ns.

Multiple-target tracking implementation in the ebCMOS camera system: the LUSIPHER prototype

NASA Astrophysics Data System (ADS)

Doan, Quang Tuyen; Barbier, Remi; Dominjon, Agnes; Cajgfinger, Thomas; Guerin, Cyrille

2012-06-01

The domain of the low light imaging systems progresses very fast, thanks to detection and electronic multiplication technology evolution, such as the emCCD (electron multiplying CCD) or the ebCMOS (electron bombarded CMOS). We present an ebCMOS camera system that is able to track every 2 ms more than 2000 targets with a mean number of photons per target lower than two. The point light sources (targets) are spots generated by a microlens array (Shack-Hartmann) used in adaptive optics. The Multiple-Target-Tracking designed and implemented on a rugged workstation is described. The results and the performances of the system on the identification and tracking are presented and discussed.

Quantitative phase microscopy for cellular dynamics based on transport of intensity equation.

PubMed

Li, Ying; Di, Jianglei; Ma, Chaojie; Zhang, Jiwei; Zhong, Jinzhan; Wang, Kaiqiang; Xi, Teli; Zhao, Jianlin

2018-01-08

We demonstrate a simple method for quantitative phase imaging of tiny transparent objects such as living cells based on the transport of intensity equation. The experiments are performed using an inverted bright field microscope upgraded with a flipping imaging module, which enables to simultaneously create two laterally separated images with unequal defocus distances. This add-on module does not include any lenses or gratings and is cost-effective and easy-to-alignment. The validity of this method is confirmed by the measurement of microlens array and human osteoblastic cells in culture, indicating its potential in the applications of dynamically measuring living cells and other transparent specimens in a quantitative, non-invasive and label-free manner.

Flexible electronic control system based on FPGA for liquid-crystal microlens

NASA Astrophysics Data System (ADS)

Zhang, Bo; Xin, Zhaowei; Li, Dapeng; Wei, Dong; Zhang, Xinyu; Wang, Haiwei; Xie, Changsheng

2018-02-01

Traditional imaging based on common optical lens can only be used to collect intensity information of incident beams, but actually lightwave also carries other mode information about targets and environment, including: spectrum, wavefront, and depth of target, and so on. It is very important to acquire those information mentioned for efficiently detecting and identifying targets in complex background. There is a urgent need to develop new high-performance optical imaging components. The liquid-crystal microlens (LCMs) only by applying spatial electrical field to change optical performance, have demonstrated remarkable advantages comparing conventional lenses, and therefore show a widely application prospect. Because the physical properties of the spatial electric fields between electrode plates in LCMs are directly related to the light-field performances of LCMs, the quality of voltage signal applied to LCMs needs high requirements. In this paper, we design and achieve a new type of digital voltage equipment with a wide adjustable voltage range and high precise voltage to effectively drive and adjust LCMs. More importantly, the device primarily based on field-programmable gate array(FPGA) can generate flexible and stable voltage signals to cooperate with the various functions of LCMs. Our experiments show that through the electronic control system, the LCMs already realize several significant functions including: electrically swing focus, wavefront imaging, electrically tunable spectral imaging and light-field imaging.

High density pixel array and laser micro-milling method for fabricating array

NASA Technical Reports Server (NTRS)

McFall, James Earl (Inventor); Wiener-Avnear, Eliezer (Inventor)

2003-01-01

A pixel array device is fabricated by a laser micro-milling method under strict process control conditions. The device has an array of pixels bonded together with an adhesive filling the grooves between adjacent pixels. The array is fabricated by moving a substrate relative to a laser beam of predetermined intensity at a controlled, constant velocity along a predetermined path defining a set of grooves between adjacent pixels so that a predetermined laser flux per unit area is applied to the material, and repeating the movement for a plurality of passes of the laser beam until the grooves are ablated to a desired depth. The substrate is of an ultrasonic transducer material in one example for fabrication of a 2D ultrasonic phase array transducer. A substrate of phosphor material is used to fabricate an X-ray focal plane array detector.

OGLE-2016-BLG-0168 Binary Microlensing Event: Prediction and Confirmation of the Microlens Parallax Effect from Space-based Observations

DOE Office of Scientific and Technical Information (OSTI.GOV)

Shin, I.-G.; Yee, J. C.; Jung, Y. K.

The microlens parallax is a crucial observable for conclusively identifying the nature of lens systems in microlensing events containing or composed of faint (even dark) astronomical objects such as planets, neutron stars, brown dwarfs, and black holes. With the commencement of a new era of microlensing in collaboration with space-based observations, the microlens parallax can be routinely measured. In addition, space-based observations can provide opportunities to verify the microlens parallax measured from ground-only observations and to find a unique solution to the lensing light-curve analysis. Furthermore, since most space-based observations cannot cover the full light curves of lensing events, itmore » is also necessary to verify the reliability of the information extracted from fragmentary space-based light curves. We conduct a test based on the microlensing event OGLE-2016-BLG-0168, created by a binary lens system consisting of almost equal mass M-dwarf stars, to demonstrate that it is possible to verify the microlens parallax and to resolve degeneracies using the space-based light curve even though the observations are fragmentary. Since space-based observatories will frequently produce fragmentary light curves due to their short observing windows, the methodology of this test will be useful for next-generation microlensing experiments that combine space-based and ground-based collaboration.« less

OGLE-2016-BLG-0168 Binary Microlensing Event: Prediction and Confirmation of the Microlens Parallax Effect from Space-based Observations

NASA Astrophysics Data System (ADS)

Shin, I.-G.; Udalski, A.; Yee, J. C.; Calchi Novati, S.; Han, C.; Skowron, J.; Mróz, P.; Soszyński, I.; Poleski, R.; Szymański, M. K.; Kozłowski, S.; Pietrukowicz, P.; Ulaczyk, K.; Pawlak, M.; OGLE Collaboration; Albrow, M. D.; Gould, A.; Chung, S.-J.; Hwang, K.-H.; Jung, Y. K.; Ryu, Y.-H.; Zhu, W.; Cha, S.-M.; Kim, D.-J.; Kim, H.-W.; Kim, S.-L.; Lee, C.-U.; Lee, Y.; Park, B.-G.; Pogge, R. W.; KMTNet Group; Beichman, C.; Bryden, G.; Carey, S.; Gaudi, B. S.; Henderson, C. B.; Shvartzvald, Y.; Spitzer Team

2017-11-01

The microlens parallax is a crucial observable for conclusively identifying the nature of lens systems in microlensing events containing or composed of faint (even dark) astronomical objects such as planets, neutron stars, brown dwarfs, and black holes. With the commencement of a new era of microlensing in collaboration with space-based observations, the microlens parallax can be routinely measured. In addition, space-based observations can provide opportunities to verify the microlens parallax measured from ground-only observations and to find a unique solution to the lensing light-curve analysis. Furthermore, since most space-based observations cannot cover the full light curves of lensing events, it is also necessary to verify the reliability of the information extracted from fragmentary space-based light curves. We conduct a test based on the microlensing event OGLE-2016-BLG-0168, created by a binary lens system consisting of almost equal mass M-dwarf stars, to demonstrate that it is possible to verify the microlens parallax and to resolve degeneracies using the space-based light curve even though the observations are fragmentary. Since space-based observatories will frequently produce fragmentary light curves due to their short observing windows, the methodology of this test will be useful for next-generation microlensing experiments that combine space-based and ground-based collaboration.

Simple method based on intensity measurements for characterization of aberrations from micro-optical components.

PubMed

Perrin, Stephane; Baranski, Maciej; Froehly, Luc; Albero, Jorge; Passilly, Nicolas; Gorecki, Christophe

2015-11-01

We report a simple method, based on intensity measurements, for the characterization of the wavefront and aberrations produced by micro-optical focusing elements. This method employs the setup presented earlier in [Opt. Express 22, 13202 (2014)] for measurements of the 3D point spread function, on which a basic phase-retrieval algorithm is applied. This combination allows for retrieval of the wavefront generated by the micro-optical element and, in addition, quantification of the optical aberrations through the wavefront decomposition with Zernike polynomials. The optical setup requires only an in-motion imaging system. The technique, adapted for the optimization of micro-optical component fabrication, is demonstrated by characterizing a planoconvex microlens.

High-Reliability Pump Module for Non-Planar Ring Oscillator Laser

NASA Technical Reports Server (NTRS)

Liu, Duncan T.; Qiu, Yueming; Wilson, Daniel W.; Dubovitsky, Serge; Forouhar, Siamak

2007-01-01

We propose and have demonstrated a prototype high-reliability pump module for pumping a Non-Planar Ring Oscillator (NPRO) laser suitable for space missions. The pump module consists of multiple fiber-coupled single-mode laser diodes and a fiber array micro-lens array based fiber combiner. The reported Single-Mode laser diode combiner laser pump module (LPM) provides a higher normalized brightness at the combined beam than multimode laser diode based LPMs. A higher brightness from the pump source is essential for efficient NPRO laser pumping and leads to higher reliability because higher efficiency requires a lower operating power for the laser diodes, which in turn increases the reliability and lifetime of the laser diodes. Single-mode laser diodes with Fiber Bragg Grating (FBG) stabilized wavelength permit the pump module to be operated without a thermal electric cooler (TEC) and this further improves the overall reliability of the pump module. The single-mode laser diode LPM is scalable in terms of the number of pump diodes and is capable of combining hundreds of fiber-coupled laser diodes. In the proof-of-concept demonstration, an e-beam written diffractive micro lens array, a custom fiber array, commercial 808nm single mode laser diodes, and a custom NPRO laser head are used. The reliability of the proposed LPM is discussed.

Aberration analysis and calculation in system of Gaussian beam illuminates lenslet array

NASA Astrophysics Data System (ADS)

Zhao, Zhu; Hui, Mei; Zhou, Ping; Su, Tianquan; Feng, Yun; Zhao, Yuejin

2014-09-01

Low order aberration was founded when focused Gaussian beam imaging at Kodak KAI -16000 image detector, which is integrated with lenslet array. Effect of focused Gaussian beam and numerical simulation calculation of the aberration were presented in this paper. First, we set up a model of optical imaging system based on previous experiment. Focused Gaussian beam passed through a pinhole and was received by Kodak KAI -16000 image detector whose microlenses of lenslet array were exactly focused on sensor surface. Then, we illustrated the characteristics of focused Gaussian beam and the effect of relative space position relations between waist of Gaussian beam and front spherical surface of microlenses to the aberration. Finally, we analyzed the main element of low order aberration and calculated the spherical aberration caused by lenslet array according to the results of above two steps. Our theoretical calculations shown that , the numerical simulation had a good agreement with the experimental result. Our research results proved that spherical aberration was the main element and made up about 93.44% of the 48 nm error, which was demonstrated in previous experiment. The spherical aberration is inversely proportional to the value of divergence distance between microlens and waist, and directly proportional to the value of the Gaussian beam waist radius.

Fabrication and optically pumped lasing of plasmonic nanolaser with regular ZnO/GaN nanoheterojunction array

NASA Astrophysics Data System (ADS)

Huang, Xiaoping; Zhang, Peifeng; Lin, En; Wang, Peng; Mei, Mingwei; Huang, Qiuying; Jiao, Jiao; Zhao, Qing

2017-09-01

We present the design and fabrication of a novel regularly arrayed plasmonic nanolasers. This main microstructure of the device is composed of a hexagonal array of n-ZnO/p-GaN nanoheterojunctions fabricated using the micro-fabrication method. Furthermore, the optically pumped lasing in the device is demonstrated. The spectroscopy characterization results of the device show that the surface plasmon excited around the NWs surface can be used to stimulate and strongly compress the optical modes in the NW cavity. This electromagnetic confinement effect is employed to optimize the beam quality and increase the light intensity compared to the laser fabricated with the bare NWs array. The impact of the array arrangement on the coherent combining efficiency of the arrayed nanolasers has been numerically studied. The results show that the arrayed hexagonal nanolasers could improve the combining efficiency compared to the nanolaser with the randomly positioned array. Qualitatively, these calculated results agree well with the experimental results of the laser beam spot mapping. This demonstrates the scope for using such architectures to improve the combination efficiency of the arrayed nanolasers.

Volumetric Light-field Encryption at the Microscopic Scale

PubMed Central

Li, Haoyu; Guo, Changliang; Muniraj, Inbarasan; Schroeder, Bryce C.; Sheridan, John T.; Jia, Shu

2017-01-01

We report a light-field based method that allows the optical encryption of three-dimensional (3D) volumetric information at the microscopic scale in a single 2D light-field image. The system consists of a microlens array and an array of random phase/amplitude masks. The method utilizes a wave optics model to account for the dominant diffraction effect at this new scale, and the system point-spread function (PSF) serves as the key for encryption and decryption. We successfully developed and demonstrated a deconvolution algorithm to retrieve both spatially multiplexed discrete data and continuous volumetric data from 2D light-field images. Showing that the method is practical for data transmission and storage, we obtained a faithful reconstruction of the 3D volumetric information from a digital copy of the encrypted light-field image. The method represents a new level of optical encryption, paving the way for broad industrial and biomedical applications in processing and securing 3D data at the microscopic scale. PMID:28059149

Volumetric Light-field Encryption at the Microscopic Scale

NASA Astrophysics Data System (ADS)

Li, Haoyu; Guo, Changliang; Muniraj, Inbarasan; Schroeder, Bryce C.; Sheridan, John T.; Jia, Shu

2017-01-01

We report a light-field based method that allows the optical encryption of three-dimensional (3D) volumetric information at the microscopic scale in a single 2D light-field image. The system consists of a microlens array and an array of random phase/amplitude masks. The method utilizes a wave optics model to account for the dominant diffraction effect at this new scale, and the system point-spread function (PSF) serves as the key for encryption and decryption. We successfully developed and demonstrated a deconvolution algorithm to retrieve both spatially multiplexed discrete data and continuous volumetric data from 2D light-field images. Showing that the method is practical for data transmission and storage, we obtained a faithful reconstruction of the 3D volumetric information from a digital copy of the encrypted light-field image. The method represents a new level of optical encryption, paving the way for broad industrial and biomedical applications in processing and securing 3D data at the microscopic scale.

Fundamental Study on One-Dimensional-Array Medical Ultrasound Probe with Piezoelectric Polycrystalline Film by Hydrothermal Method: Experimental Fabrication of One-Dimensional-Array Ultrasound Probe

NASA Astrophysics Data System (ADS)

Endo, Akito; Kawashima, Norimichi; Takeuchi, Shinichi; Ishikawa, Mutsuo; Kurosawa, Minoru Kuribayashi

2007-07-01

We deposited a lead zirconate titanete (PZT) polycrystalline film on a titanium substrate by the hydrothermal method and fabricated a transducer using the PZT film for use as an ultrasound probe. A 10 MHz miniature one-dimensional-array medical ultrasound probe containing the PZT film was developed. After sputtering titanium on the surface of a hydroxyapatite substrate, the titanium film on the substrate was etched by the photolithography to form a one-dimensional titanium film electrode array. We could thus fabricate a miniature one-dimensional-array ultrasound probe by the hydrothermal method. Transmitted ultrasound pulses from a 10 MHz commercial ultrasound probe were received by the newly fabricated one-dimensional-array ultrasound probe. The fabrication process of the probe and the results of experiments on receiving waveforms were reported in this paper.

Cost-effective parallel optical interconnection module based on fully passive-alignment process

NASA Astrophysics Data System (ADS)

Son, Dong Hoon; Heo, Young Soon; Park, Hyoung-Jun; Kang, Hyun Seo; Kim, Sung Chang

2017-11-01

In optical interconnection technology, high-speed and large data transitions with low error rate and cost reduction are key issues for the upcoming 8K media era. The researchers present notable types of optical manufacturing structures of a four-channel parallel optical module by fully passive alignment, which are able to reduce manufacturing time and cost. Each of the components, such as vertical-cavity surface laser/positive-intrinsic negative-photodiode array, microlens array, fiber array, and receiver (RX)/transmitter (TX) integrated circuit, is integrated successfully using flip-chip bonding, die bonding, and passive alignment with a microscope. Clear eye diagrams are obtained by 25.78-Gb/s (for TX) and 25.7-Gb/s (for RX) nonreturn-to-zero signals of pseudorandom binary sequence with a pattern length of 231 to 1. The measured responsivity and minimum sensitivity of the RX are about 0.5 A/W and ≤-6.5 dBm at a bit error rate (BER) of 10-12, respectively. The optical power margin at a BER of 10-12 is 7.5 dB, and cross talk by the adjacent channel is ≤1 dB.

Rapid production of polymer microstructures

NASA Astrophysics Data System (ADS)

Nagarajan, Pratapkumar

The goal of this research is to develop an integrated polymer embossing module, with which difficult-to-emboss polymer microstructures and microparts can be fabricated in a cost-effective manner. In particular, the research addresses three major limitations of the hot embossing process, namely, long cycle time, difficulty in producing shell patterns, and difficulty in building up a high embossing pressure on thick substrates. To overcome these limitations, three new technical approaches - two-station embossing, rubber-assisted embossing, and through-thickness embossing - were developed and investigated. Fundamental understanding of these new embossing techniques were achieved through extensive experimental and theoretical studies involving parametric experiments, rheological characterization, surface investigation, mathematical modeling, and computer simulation. A two-station embossing process was developed to reduce the hot embossing cycle time, accomplished by decoupling the heating and cooling stations. For this purpose, the standard hot embossing mold was replaced by a shell type mold, and separate hot and cold stations were used to selectively heat and cool the shell mold during the process. With this method, microlens arrays and micro channels were fabricated onto ABS and HDPE substrates with a cycle time of approximately 10 s. Numerical simulations were performed to study the effect of different design parameters, including thermal contact resistance, shell material and shell thickness, on the thermal response at the mold surface. Furthermore, the polymer flow during the two-station embossing process for the microlens was numerically studied. The simulated filling behavior agreed with the experimental observation, and the predicted thermal and deformation history of the polymer offers a good explanation on the experimentally observed process characteristics. The second technique, rubber-assisted embossing, involving a rubber pad as a soft counter tool, was developed for precision embossing of shell structures. The rubber pad acted as a temporary negative during embossing and recovered to its original geometry after mold opening. With rubber-assisted embossing, a micro shell pattern with a characteristic size of 50 mum was successfully patterned on 25-mum thick polystyrene films. A focused study was undertaken on rubber-assisted isothermal embossing to establish the relationship between process parameters and pattern replication. It was found that the pattern replication and film uniformity were affected by the embossing temperature and the hardness of rubber. It was also found that adequate plasticity and higher stiffness of the deforming film were essential in achieving excellent pattern replication and uniformity in film thickness. The through-thickness embossing process was developed for embossing pressure buildup and fabrication of 3-D parts. The embossing tool includes a punching head and to-be-replicated features in the socket behind the punching head. The built-in punching head facilitates a through-thickness action and provides a close-die environment for embossing pressure buildup. The method was used to emboss multichannel millimeter waveguides which requires crispy edges and accurate dimensions. With a tool temperature of 140°C, an embossing time of 3 min and a total cycle time of 7 min, discrete 4-channel waveguides were successfully embossed from a room-temperature ABS substrate. A computer model was established to study the flow behavior during through-thickness embossing. It was found that nonisothermal embossing conditions helped to confine the polymer in the cavity and reduce the outflow into the surrounding region, thus achieving complete fill of the cavity.

A SIMPLE METHOD FOR MEASURING THE ELECTRON-BEAM MAGNETIZATION

DOE Office of Scientific and Technical Information (OSTI.GOV)

Halavanau, A.; Qiang, G.; Wisniewski, E.

2016-10-18

There are a number of projects that require magnetized beams, such as electron cooling or aiding in “flat” beam transforms. Here we explore a simple technique to characterize the magnetization, observed through the angular momentum of magnetized beams. These beams are produced through photoemission. The generating drive laser first passes through microlens arrays (fly-eye light condensers) to form a transversely modulated pulse incident on the photocathode surface [1]. The resulting charge distribution is then accelerated from the photocathode. We explore the evolution of the pattern via the relative shearing of the beamlets, providing information about the angular momentum. This methodmore » is illustrated through numerical simulations and preliminary measurements carried out at the Argonne Wakefield Accelerator (AWA) facility are presented.« less

Lytro camera technology: theory, algorithms, performance analysis

NASA Astrophysics Data System (ADS)

Georgiev, Todor; Yu, Zhan; Lumsdaine, Andrew; Goma, Sergio

2013-03-01

The Lytro camera is the first implementation of a plenoptic camera for the consumer market. We consider it a successful example of the miniaturization aided by the increase in computational power characterizing mobile computational photography. The plenoptic camera approach to radiance capture uses a microlens array as an imaging system focused on the focal plane of the main camera lens. This paper analyzes the performance of Lytro camera from a system level perspective, considering the Lytro camera as a black box, and uses our interpretation of Lytro image data saved by the camera. We present our findings based on our interpretation of Lytro camera file structure, image calibration and image rendering; in this context, artifacts and final image resolution are discussed.

Fabrication of non-hexagonal close packed colloidal array on a substrate by transfer

NASA Astrophysics Data System (ADS)

Banik, Meneka; Mukherjee, Rabibrata

Self-organized colloidal arrays find application in fabrication of solar cells with advanced light management strategies. We report a simple spincoating based approach for fabricating two dimensional colloidal crystals with hexagonal and non-hexagonal close packed assembly on flat and nanopatterned substrates. The non-HCP arrays were fabricated by spin coating the particles onto soft lithographically fabricated substrates. The substrate patterns impose directionality to the particles by confining them within the grooves. We have developed a technique by which the HCP and non-HCP arrays can be transferred to any surface. For this purpose the colloidal arrays were fabricated on a UV degradable PMMA layer, resulting in transfer of the particles on UV exposure. This allows the colloidal structures to be transported across substrates irrespective of their surface energy, wettability or morphology. Since the particles are transferred without exposing it to any kind of chemical or thermal environment, it can be utilized for placing particles on top of thin film solar cells for improving their absorption efficiency.

Novel fabrication technique of hybrid structure lens array for 3D images

NASA Astrophysics Data System (ADS)

Lee, Junsik; Kim, Junoh; Kim, Cheoljoong; Shin, Dooseub; Koo, Gyohyun; Won, Yong Hyub

2016-03-01

Tunable liquid lens arrays can produce three dimensional images by using electrowetting principle that alters surface tensions by applying voltage. This method has advantages of fast response time and low power consumption. However, it is challenging to fabricate a high fill factor liquid lens array and operate three dimensional images which demand high diopter. This study describes a hybrid structure lens array which has not only a liquid lens array but a solid lens array. A concave-shape lens array is unavoidable when using only the liquid lens array and some voltages are needed to make the lens flat. By placing the solid lens array on the liquid lens array, initial diopter can be positive. To fabricate the hybrid structure lens array, a conventional lithographic process in semiconductor manufacturing is needed. A negative photoresist SU-8 was used as chamber master molds. PDMS and UV adhesive replica molding are done sequentially. Two immiscible liquids, DI water and dodecane, are injected in the fabricated chamber, followed by sealing. The fabricated structure has a 20 by 20 pattern of cylindrical shaped circle array and the aperture size of each lens is 1mm. The thickness of the overall hybrid structure is about 2.8mm. Hybrid structure lens array has many advantages. Solid lens array has almost 100% fill factor and allow high efficiency. Diopter can be increased by more than 200 and negative diopter can be shifted to the positive region. This experiment showed several properties of the hybrid structure and demonstrated its superiority.

Advanced microlens and color filter process technology for the high-efficiency CMOS and CCD image sensors

NASA Astrophysics Data System (ADS)

Fan, Yang-Tung; Peng, Chiou-Shian; Chu, Cheng-Yu

2000-12-01

New markets are emerging for digital electronic image device, especially in visual communications, PC camera, mobile/cell phone, security system, toys, vehicle image system and computer peripherals for document capture. To enable one-chip image system that image sensor is with a full digital interface, can make image capture devices in our daily lives. Adding a color filter to such image sensor in a pattern of mosaics pixel or wide stripes can make image more real and colorful. We can say 'color filter makes the life more colorful color filter is? Color filter means can filter image light source except the color with specific wavelength and transmittance that is same as color filter itself. Color filter process is coating and patterning green, red and blue (or cyan, magenta and yellow) mosaic resists onto matched pixel in image sensing array pixels. According to the signal caught from each pixel, we can figure out the environment image picture. Widely use of digital electronic camera and multimedia applications today makes the feature of color filter becoming bright. Although it has challenge but it is very worthy to develop the process of color filter. We provide the best service on shorter cycle time, excellent color quality, high and stable yield. The key issues of advanced color process have to be solved and implemented are planarization and micro-lens technology. Lost of key points of color filter process technology have to consider will also be described in this paper.

Intra-Chip Free-Space Optical Interconnect: System, Device, Integration and Prototyping

NASA Astrophysics Data System (ADS)

Ciftcioglu, Berkehan

Currently, on-chip optical interconnect schemes already proposed utilize circuit switching using wavelength division multiplexing (WDM) or all-optical packet switching, all based on planar optical waveguides and related photonic devices such as microrings. These proposed approaches pose significant challenges in latency, energy efficiency, integration, and scalability. This thesis presents a new alternative approach by utilizing free-space optics. This 3-D integrated intra-chip free-space optical interconnect (FSOI) leverages mature photonic devices such as integrated lasers, photodiodes, microlenses and mirrors. It takes full advantages of the latest developments in 3-D integration technologies. This interconnect system provides point-to-point free-space optical links between any two communication nodes to construct an all-to-all intra-chip communication network with little or no arbitration. Therefore, it has significant networking advantages over conventional electrical and waveguide-based optical interconnects. An FSOI system is evaluated based on the real device parameters, predictive technology models and International Roadmap of Semiconductor's predictions. A single FSOI link achieves 10-Gbps data rate with 0.5-pJ/bit energy efficiency and less than 10--12 bit-error-rate (BER). A system using this individual link can provide scalability up to 36 nodes, providing 10-Tbps aggregate bandwidth. A comparison analysis performed between a WDM-based waveguide interconnect system and the proposed FSOI system shows that FSOI achieves better energy efficiency than the WDM one as the technology scales. Similarly, network simulation on a 16-core microprocessor using the proposed FSOI system instead of mesh networks has been shown to speed up the system by 12% and reduce the energy consumption by 33%. As a part of the development of a 3-D integrated FSOI system, operating at 850 nm with a 10-Gbps data rate per optical link, the photonics devices and optical components are individually designed and fabricated. The photodiodes (PDs) are designed to have large area for efficient light coupling and low capacitance to achieve large bandwidth, while achieving reasonably high responsivity. A metal-semiconductor-metal (MSM) structure is chosen over p-i-n ones to reduce parasitic capacitance per area, to allow less stringent microlens-to-PD alignment for efficient light coupling with a large bandwidth. A novel MSM germanium PD is implemented using an amorphous silicon (a-Si) layer on top of the undoped germanium substrate, serving as a barrier enhancement layer, mitigating the low Schottky barrier height for holes due to fermi level pinning and a surface passivation layer, preventing charge accumulation and image force lowering of the barrier. Therefore, the dark current is reduced and low-frequency gain is eliminated. The PDs achieve a 13-GHz bandwidth with a 0.315-A/W responsivity and a 1.7-nAmum² dark current density. The microlenses are fabricated on a fused silica substrate based on the photoresist melt-and-reflow technique, followed by dry etching into fused silica substrate. The measured focal length of a 220-mum aperture size microlens is 350-mum away from the backside of the substrate. The vertical-cavity surface-emitting lasers (VCSELs) are fabricated on a commercial molecular beam epitaxially (MBE) grown GaAs wafer. The fabricated 8-mum aperture size VCSEL can achieve 0.65-mW optical power at a 1.5-mA forward bias current with a threshold current of 0.48 mA and a 0.67-A/W slope efficiency. Three prototypes are implemented via integrating the individually fabricated components using non-conductive epoxy and wirebonding. The first prototype, built on a printed circuit board (PCB) using commercial VCSEL arrays, achieves a 5-dB transmission loss and less than -30-dB crosstalk at 1-cm distance with a small-signal bandwidth of 10 GHz, limited by the VCSEL. The second board-level prototype uses all fabricated components integrated on a PCB. The prototype achieves a 9-dB transmission loss at 3-cm distance and a 4.4-GHz bandwidth. The chip-level prototype is built on a germanium carrier with integrated MSM Ge PDs, microlenses on fused silica and VCSEL chip on GaAs substrates. The prototype achieves 4-dB transmission loss at 1 cm and 3.3-GHz bandwidth, limited by commercial VCSEL bandwidth. (Abstract shortened by UMI.)

High density pixel array

NASA Technical Reports Server (NTRS)

McFall, James Earl (Inventor); Wiener-Avnear, Eliezer (Inventor)

2004-01-01

A pixel array device is fabricated by a laser micro-milling method under strict process control conditions. The device has an array of pixels bonded together with an adhesive filling the grooves between adjacent pixels. The array is fabricated by moving a substrate relative to a laser beam of predetermined intensity at a controlled, constant velocity along a predetermined path defining a set of grooves between adjacent pixels so that a predetermined laser flux per unit area is applied to the material, and repeating the movement for a plurality of passes of the laser beam until the grooves are ablated to a desired depth. The substrate is of an ultrasonic transducer material in one example for fabrication of a 2D ultrasonic phase array transducer. A substrate of phosphor material is used to fabricate an X-ray focal plane array detector.

Galactic Distribution of Planets from Spitzer Microlens Parallaxes

NASA Astrophysics Data System (ADS)

Gould, Andrew; Carey, Sean; Yee, Jennifer

2014-12-01

We will measure the 'microlens parallaxes' of about 120 microlensing events that peak during Spitzer's 'bulge window' (2015 Jun 09 - Jul 19), by comparing simultaneous Spitzer and ground-based microlensing lightcurves, making use of Spitzer's location about 1 AU from Earth. These measurements will enable mass and distance measurements of about 4 microlensing planets. The ensemble of planet and non-planet distance measurements will yield the first probe of the Galactic distribution of planets Microlens planet mass measurements are very rare and have proved extremely interesting in every case. Microlensing identifies planets at and beyond the snowline, probing unique parameter space and providing vital information to constrain planet formation and migration theories. But the sample of ground-based microlens-parallax measurements is highly biased toward special systems. Spitzer would provide the first unbiased study. The same survey would provide a unique probe of brown dwarf binaries, and yield the first mass-based (not light-based) measurement of the stellar mass function (i.e., including dark objects such as black holes). A very successful 2014 'Pilot Program' demonstrates that this project is technically and scientifically viable. (As in the previous 'Pilot Program', we request zero day proprietary period.)

Portable thermo-photovoltaic power source

DOEpatents

Zuppero, Anthony C.; Krawetz, Barton; Barklund, C. Rodger; Seifert, Gary D.

1997-01-14

A miniature thermo-photovoltaic (TPV) device for generation of electrical power for use in portable electronic devices. A TPV power source is constructed to provide a heat source chemical reactor capable of using various fuels, such as liquid hydrocarbons, including but not limited to propane, LPG, butane, alcohols, oils and diesel fuels to generate a source of photons. A reflector dish guides misdirected photon energy from the photon source toward a photovoltaic array. A thin transparent protector sheet is disposed between the photon source and the array to reflect back thermal energy that cannot be converted to electricity, and protect the array from thermal damage. A microlens disposed between the protector sheet and the array further focuses the tailored band of photon energy from the photon source onto an array of photovoltaic cells, whereby the photon energy is converted to electrical power. A heat recuperator removes thermal energy from reactor chamber exhaust gases, preferably using mini- or micro-bellows to force air and fuel past the exhaust gases, and uses the energy to preheat the fuel and oxidant before it reaches the reactor, increasing system efficiency. Mini- or micro-bellows force ambient air through the system both to supply oxidant and to provide cooling. Finally, an insulator, which is preferably a super insulator, is disposed around the TPV power source to reduce fuel consumption, and to keep the TPV power source cool to the touch so it can be used in hand-held devices.

Miniaturization of dielectric liquid microlens in package

PubMed Central

Yang, Chih-Cheng; Tsai, C. Gary; Yeh, J. Andrew

2010-01-01

This study presents packaged microscale liquid lenses actuated with liquid droplets of 300–700 μm in diameter using the dielectric force manipulation. The liquid microlens demonstrated function focal length tunability in a plastic package. The focal length of the liquid lens with a lens droplet of 500 μm in diameter is shortened from 4.4 to 2.2 mm when voltages applied change from 0 to 79 Vrms. Dynamic responses that are analyzed using 2000 frames∕s high speed motion cameras show that the advancing and receding times are measured to be 90 and 60 ms, respectively. The size effect of dielectric liquid microlens is characterized for a lens droplet of 300–700 μm in diameter in an aspect of focal length. PMID:21267438

Simulation for light extraction efficiency of OLEDs with spheroidal microlenses in hexagonal array

NASA Astrophysics Data System (ADS)

Bae, Hyungchul; Kim, Jun Soo; Hong, Chinsoo

2018-05-01

A theoretical model based on ray optics is used to simulate the optical performance of organic light-emitting diodes (OLEDs) with spheroidal microlens arrays (MLAs) in a hexagonal array configuration using the Monte Carlo method. In simulations, ray tracing was performed until 20 reflections occurred from the metal cathode, with 10 consecutive reflections permitted in a single lens pattern. The parameters describing the shape and array of the lens pattern of a MLA are its radius, height, contact angle, and fill factor (FF). Many previous results on how these parameters affect light extraction efficiency (LEE) are inconsistent. In this paper, these contradictory results are discussed and explained by introducing a new parameter. To examine light extraction from an OLED through a MLA, the LEE enhancement is studied considering the effect of absorption by indium tin oxide during multiple reflections from the metal cathode. The device size where LEE enhancement is unchanged with changing lens pattern was identified for a fixed FF; under this condition, the optimal LEE enhancement, 84%, can be obtained using an OLED with a close-packed spheroidal MLA. An ideal maximum LEE enhancement of 120% was achieved with a device with an infinite-sized MLA. The angular intensity distribution of light emitted through a MLA is considered in addition to LEE enhancement for an optimized MLA.

Geiger-mode avalanche photodiode focal plane arrays for three-dimensional imaging LADAR

NASA Astrophysics Data System (ADS)

Itzler, Mark A.; Entwistle, Mark; Owens, Mark; Patel, Ketan; Jiang, Xudong; Slomkowski, Krystyna; Rangwala, Sabbir; Zalud, Peter F.; Senko, Tom; Tower, John; Ferraro, Joseph

2010-09-01

We report on the development of focal plane arrays (FPAs) employing two-dimensional arrays of InGaAsP-based Geiger-mode avalanche photodiodes (GmAPDs). These FPAs incorporate InP/InGaAs(P) Geiger-mode avalanche photodiodes (GmAPDs) to create pixels that detect single photons at shortwave infrared wavelengths with high efficiency and low dark count rates. GmAPD arrays are hybridized to CMOS read-out integrated circuits (ROICs) that enable independent laser radar (LADAR) time-of-flight measurements for each pixel, providing three-dimensional image data at frame rates approaching 200 kHz. Microlens arrays are used to maintain high fill factor of greater than 70%. We present full-array performance maps for two different types of sensors optimized for operation at 1.06 μm and 1.55 μm, respectively. For the 1.06 μm FPAs, overall photon detection efficiency of >40% is achieved at <20 kHz dark count rates with modest cooling to ~250 K using integrated thermoelectric coolers. We also describe the first evalution of these FPAs when multi-photon pulses are incident on single pixels. The effective detection efficiency for multi-photon pulses shows excellent agreement with predictions based on Poisson statistics. We also characterize the crosstalk as a function of pulse mean photon number. Relative to the intrinsic crosstalk contribution from hot carrier luminescence that occurs during avalanche current flows resulting from single incident photons, we find a modest rise in crosstalk for multi-photon incident pulses that can be accurately explained by direct optical scattering.

Facile fabrication of super-hydrophobic nano-needle arrays via breath figures method.

PubMed

Kim, Jiseok; Lew, Brian; Kim, Woo Soo

2011-12-06

Super-hydrophobic surfaces which have been fabricated by various methods such as photolithography, chemical treatment, self-assembly, and imprinting have gained enormous attention in recent years. Especially 2D arrays of nano-needles have been shown to have super-hydrophobicity due to their sharp surface roughness. These arrays can be easily generated by removing the top portion of the honeycomb films prepared by the breath figures method. The hydrophilic block of an amphiphilic polymer helps in the fabrication of the nano-needle arrays through the production of well-ordered honeycomb films and good adhesion of the film to a substrate. Anisotropic patterns with water wettability difference can be useful for patterning cells and other materials using their selective growth on the hydrophilic part of the pattern. However, there has not been a simple way to generate patterns with highly different wettability. Mechanical stamping of the nano-needle array with a polyurethane stamp might be the simplest way to fabricate patterns with wettability difference. In this study, super-hydrophobic nano-needle arrays were simply fabricated by removing the top portion of the honeycomb films. The maximum water contact angle obtained with the nano-needle array was 150°. By controlling the pore size and the density of the honeycomb films, the height, width, and density of nano-needle arrays were determined. Anisotropic patterns with different wettability were fabricated by simply pressing the nano-needle array at ambient temperature with polyurethane stamps which were flexible but tough. Mechanical stamping of nano-needle arrays with micron patterns produced hierarchical super-hydrophobic structures.PACS: 05.70.Np, 68.55.am, 68.55.jm.

Facile fabrication of super-hydrophobic nano-needle arrays via breath figures method

PubMed Central

2011-01-01

Super-hydrophobic surfaces which have been fabricated by various methods such as photolithography, chemical treatment, self-assembly, and imprinting have gained enormous attention in recent years. Especially 2D arrays of nano-needles have been shown to have super-hydrophobicity due to their sharp surface roughness. These arrays can be easily generated by removing the top portion of the honeycomb films prepared by the breath figures method. The hydrophilic block of an amphiphilic polymer helps in the fabrication of the nano-needle arrays through the production of well-ordered honeycomb films and good adhesion of the film to a substrate. Anisotropic patterns with water wettability difference can be useful for patterning cells and other materials using their selective growth on the hydrophilic part of the pattern. However, there has not been a simple way to generate patterns with highly different wettability. Mechanical stamping of the nano-needle array with a polyurethane stamp might be the simplest way to fabricate patterns with wettability difference. In this study, super-hydrophobic nano-needle arrays were simply fabricated by removing the top portion of the honeycomb films. The maximum water contact angle obtained with the nano-needle array was 150°. By controlling the pore size and the density of the honeycomb films, the height, width, and density of nano-needle arrays were determined. Anisotropic patterns with different wettability were fabricated by simply pressing the nano-needle array at ambient temperature with polyurethane stamps which were flexible but tough. Mechanical stamping of nano-needle arrays with micron patterns produced hierarchical super-hydrophobic structures. PACS: 05.70.Np, 68.55.am, 68.55.jm PMID:22145673

Backshort-Under-Grid arrays for infrared astronomy

NASA Astrophysics Data System (ADS)

Allen, C. A.; Benford, D. J.; Chervenak, J. A.; Chuss, D. T.; Miller, T. M.; Moseley, S. H.; Staguhn, J. G.; Wollack, E. J.

2006-04-01

We are developing a kilopixel, filled bolometer array for space infrared astronomy. The array consists of three individual components, to be merged into a single, working unit; (1) a transition edge sensor bolometer array, operating in the milliKelvin regime, (2) a quarter-wave backshort grid, and (3) superconducting quantum interference device multiplexer readout. The detector array is designed as a filled, square grid of suspended, silicon bolometers with superconducting sensors. The backshort arrays are fabricated separately and will be positioned in the cavities created behind each detector during fabrication. The grids have a unique interlocking feature machined into the walls for positioning and mechanical stability. The spacing of the backshort beneath the detector grid can be set from ˜30 300 μm, by independently adjusting two process parameters during fabrication. The ultimate goal is to develop a large-format array architecture with background-limited sensitivity, suitable for a wide range of wavelengths and applications, to be directly bump bonded to a multiplexer circuit. We have produced prototype two-dimensional arrays having 8×8 detector elements. We present detector design, fabrication overview, and assembly technologies.

Servo scanning 3D micro EDM for array micro cavities using on-machine fabricated tool electrodes

NASA Astrophysics Data System (ADS)

Tong, Hao; Li, Yong; Zhang, Long

2018-02-01

Array micro cavities are useful in many fields including in micro molds, optical devices, biochips and so on. Array servo scanning micro electro discharge machining (EDM), using array micro electrodes with simple cross-sectional shape, has the advantage of machining complex 3D micro cavities in batches. In this paper, the machining errors caused by offline-fabricated array micro electrodes are analyzed in particular, and then a machining process of array servo scanning micro EDM is proposed by using on-machine fabricated array micro electrodes. The array micro electrodes are fabricated on-machine by combined procedures including wire electro discharge grinding, array reverse copying and electrode end trimming. Nine-array tool electrodes with Φ80 µm diameter and 600 µm length are obtained. Furthermore, the proposed process is verified by several machining experiments for achieving nine-array hexagonal micro cavities with top side length of 300 µm, bottom side length of 150 µm, and depth of 112 µm or 120 µm. In the experiments, a chip hump accumulates on the electrode tips like the built-up edge in mechanical machining under the conditions of brass workpieces, copper electrodes and the dielectric of deionized water. The accumulated hump can be avoided by replacing the water dielectric by an oil dielectric.

Analyzing CMOS/SOS fabrication for LSI arrays

NASA Technical Reports Server (NTRS)

Ipri, A. C.

1978-01-01

Report discusses set of design rules that have been developed as result of work with test arrays. Set of optimum dimensions is given that would maximize process output and would correspondingly minimize costs in fabrication of large-scale integration (LSI) arrays.

Real-Time Label-Free Surface Plasmon Resonance Biosensing with Gold Nanohole Arrays Fabricated by Nanoimprint Lithography

PubMed Central

Martinez-Perdiguero, Josu; Retolaza, Aritz; Otaduy, Deitze; Juarros, Aritz; Merino, Santos

2013-01-01

In this work we present a surface plasmon resonance sensor based on enhanced optical transmission through sub-wavelength nanohole arrays. This technique is extremely sensitive to changes in the refractive index of the surrounding medium which result in a modulation of the transmitted light. The periodic gold nanohole array sensors were fabricated by high-throughput thermal nanoimprint lithography. Square periodic arrays with sub-wavelength hole diameters were obtained and characterized. Using solutions with known refractive index, the array sensitivities were obtained. Finally, protein absorption was monitored in real-time demonstrating the label-free biosensing capabilities of the fabricated devices. PMID:24135989

FIMic: design for ultimate 3D-integral microscopy of in-vivo biological samples

PubMed Central

Scrofani, G.; Sola-Pikabea, J.; Llavador, A.; Sanchez-Ortiga, E.; Barreiro, J. C.; Saavedra, G.; Garcia-Sucerquia, J.; Martínez-Corral, M.

2017-01-01

In this work, Fourier integral microscope (FIMic), an ultimate design of 3D-integral microscopy, is presented. By placing a multiplexing microlens array at the aperture stop of the microscope objective of the host microscope, FIMic shows extended depth of field and enhanced lateral resolution in comparison with regular integral microscopy. As FIMic directly produces a set of orthographic views of the 3D-micrometer-sized sample, it is suitable for real-time imaging. Following regular integral-imaging reconstruction algorithms, a 2.75-fold enhanced depth of field and 2-time better spatial resolution in comparison with conventional integral microscopy is reported. Our claims are supported by theoretical analysis and experimental images of a resolution test target, cotton fibers, and in-vivo 3D-imaging of biological specimens. PMID:29359107

Design and simulation of a superposition compound eye system based on hybrid diffractive-refractive lenses.

PubMed

Zhang, Shuqing; Zhou, Luyang; Xue, Changxi; Wang, Lei

2017-09-10

Compound eyes offer a promising field of miniaturized imaging systems. In one application of a compound eye, superposition of compound eye systems forms a composite image by superposing the images produced by different channels. The geometric configuration of superposition compound eye systems is achieved by three micro-lens arrays with different pitches and focal lengths. High resolution is indispensable for the practicability of superposition compound eye systems. In this paper, hybrid diffractive-refractive lenses are introduced into the design of a compound eye system for this purpose. With the help of ZEMAX, two superposition compound eye systems with and without hybrid diffractive-refractive lenses were separately designed. Then, we demonstrate the effectiveness of using a hybrid diffractive-refractive lens to improve the image quality.

Quantitative phase imaging method based on an analytical nonparaxial partially coherent phase optical transfer function.

PubMed

Bao, Yijun; Gaylord, Thomas K

2016-11-01

Multifilter phase imaging with partially coherent light (MFPI-PC) is a promising new quantitative phase imaging method. However, the existing MFPI-PC method is based on the paraxial approximation. In the present work, an analytical nonparaxial partially coherent phase optical transfer function is derived. This enables the MFPI-PC to be extended to the realistic nonparaxial case. Simulations over a wide range of test phase objects as well as experimental measurements on a microlens array verify higher levels of imaging accuracy compared to the paraxial method. Unlike the paraxial version, the nonparaxial MFPI-PC with obliquity factor correction exhibits no systematic error. In addition, due to its analytical expression, the increase in computation time compared to the paraxial version is negligible.

Non-interferometric phase retrieval using refractive index manipulation.

PubMed

Chen, Chyong-Hua; Hsu, Hsin-Feng; Chen, Hou-Ren; Hsieh, Wen-Feng

2017-04-07

We present a novel, inexpensive and non-interferometric technique to retrieve phase images by using a liquid crystal phase shifter without including any physically moving parts. First, we derive a new equation of the intensity-phase relation with respect to the change of refractive index, which is similar to the transport of the intensity equation. The equation indicates that this technique is unneeded to consider the variation of magnifications between optical images. For proof of the concept, we use a liquid crystal mixture MLC 2144 to manufacture a phase shifter and to capture the optical images in a rapid succession by electrically tuning the applied voltage of the phase shifter. Experimental results demonstrate that this technique is capable of reconstructing high-resolution phase images and to realize the thickness profile of a microlens array quantitatively.

Confocal microscopy using variable-focal-length microlenses and an optical fiber bundle.

PubMed

Yang, Lisong; Mac Raighne, Aaron; McCabe, Eithne M; Dunbar, L Andrea; Scharf, Toralf

2005-10-01

The use of variable-focal-length (VFL) microlenses can provide a way to axially scan the foci across a sample by electronic control. We demonstrate an approach to coupling VFL microlenses individually to a fiber bundle as a way to create a high-throughput aperture array with a controllable aperture pattern. It would potentially be applied in real-time confocal imaging in vivo for biological specimens. The VFL microlenses that we used consist of a liquid-crystal film sandwiched between a pair of conductive substrates for which one has a hole-patterned electrode. One obtains the variation of the focal length by changing the applied voltage. The fiber bundle has been characterized by coupling with both coherent and incoherent light sources. We further demonstrate the use of a VFL microlens array in combination with the fiber bundle to build up a confocal system. The axial response of the confocal system has been measured without mechanical movement of the sample or the objective, and the FWHM is estimated to be approximately 16 microm, with asymmetric sidelobes.

Evaluation of multispectral plenoptic camera

NASA Astrophysics Data System (ADS)

Meng, Lingfei; Sun, Ting; Kosoglow, Rich; Berkner, Kathrin

2013-01-01

Plenoptic cameras enable capture of a 4D lightfield, allowing digital refocusing and depth estimation from data captured with a compact portable camera. Whereas most of the work on plenoptic camera design has been based a simplistic geometric-optics-based characterization of the optical path only, little work has been done of optimizing end-to-end system performance for a specific application. Such design optimization requires design tools that need to include careful parameterization of main lens elements, as well as microlens array and sensor characteristics. In this paper we are interested in evaluating the performance of a multispectral plenoptic camera, i.e. a camera with spectral filters inserted into the aperture plane of the main lens. Such a camera enables single-snapshot spectral data acquisition.1-3 We first describe in detail an end-to-end imaging system model for a spectrally coded plenoptic camera that we briefly introduced in.4 Different performance metrics are defined to evaluate the spectral reconstruction quality. We then present a prototype which is developed based on a modified DSLR camera containing a lenslet array on the sensor and a filter array in the main lens. Finally we evaluate the spectral reconstruction performance of a spectral plenoptic camera based on both simulation and measurements obtained from the prototype.

High-Performance Flexible Force and Temperature Sensing Array with a Robust Structure

NASA Astrophysics Data System (ADS)

Kim, Min-Seok; Song, Han-Wook; Park, Yon-Kyu

We have developed a flexible tactile sensor array capable of sensing physical quantities, e.g. force and temperature with high-performances and high spatial resolution. The fabricated tactile sensor consists of 8 × 8 force measuring array with 1 mm spacing and a thin metal (copper) temperature sensor. The flexible force sensing array consists of sub-millimetre-size bar-shaped semi-conductor strain gage array attached to a thin and flexible printed circuit board covered by stretchable elastomeric material on both sides. This design incorporates benefits of both materials; the semi-conductor's high performance and the polymer's mechanical flexibility and robustness, while overcoming their drawbacks of those two materials. Special fabrication processes, so called “dry-transfer technique” have been used to fabricate the tactile sensor along with standard micro-fabrication processes.

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

NASA Astrophysics Data System (ADS)

Wilbers, J. G. E.; Berenschot, J. W.; Tiggelaar, R. M.; Dogan, T.; Sugimura, K.; van der Wiel, W. G.; Gardeniers, J. G. E.; Tas, N. R.

2018-04-01

In this report, a procedure for the 3D-nanofabrication of ordered, high-density arrays of crystalline silicon nanostructures is described. Two nanolithography methods were utilized for the fabrication of the nanostructure array, viz. displacement Talbot lithography (DTL) and edge lithography (EL). DTL is employed to perform two (orthogonal) resist-patterning steps to pattern a thin Si3N4 layer. The resulting patterned double layer serves as an etch mask for all further etching steps for the fabrication of ordered arrays of silicon nanostructures. The arrays are made by means of anisotropic wet etching of silicon in combination with an isotropic retraction etch step of the etch mask, i.e. EL. The procedure enables fabrication of nanostructures with dimensions below 15 nm and a potential density of 1010 crystals cm-2.

Photolithographic Synthesis of High-Density DNA and RNA Arrays on Flexible, Transparent, and Easily Subdivided Plastic Substrates.

PubMed

Holden, Matthew T; Carter, Matthew C D; Wu, Cheng-Hsien; Wolfer, Jamison; Codner, Eric; Sussman, Michael R; Lynn, David M; Smith, Lloyd M

2015-11-17

The photolithographic fabrication of high-density DNA and RNA arrays on flexible and transparent plastic substrates is reported. The substrates are thin sheets of poly(ethylene terephthalate) (PET) coated with cross-linked polymer multilayers that present hydroxyl groups suitable for conventional phosphoramidite-based nucleic acid synthesis. We demonstrate that by modifying array synthesis procedures to accommodate the physical and chemical properties of these materials, it is possible to synthesize plastic-backed oligonucleotide arrays with feature sizes as small as 14 μm × 14 μm and feature densities in excess of 125 000/cm(2), similar to specifications attainable using rigid substrates such as glass or glassy carbon. These plastic-backed arrays are tolerant to a wide range of hybridization temperatures, and improved synthetic procedures are described that enable the fabrication of arrays with sequences up to 50 nucleotides in length. These arrays hybridize with S/N ratios comparable to those fabricated on otherwise identical arrays prepared on glass or glassy carbon. This platform supports the enzymatic synthesis of RNA arrays and proof-of-concept experiments are presented showing that the arrays can be readily subdivided into smaller arrays (or "millichips") using common laboratory-scale laser cutting tools. These results expand the utility of oligonucleotide arrays fabricated on plastic substrates and open the door to new applications for these important bioanalytical tools.

Method to fabricate hollow microneedle arrays

DOEpatents

Kravitz, Stanley H [Placitas, NM; Ingersoll, David [Albuquerque, NM; Schmidt, Carrie [Los Lunas, NM; Flemming, Jeb [Albuquerque, NM

2006-11-07

An inexpensive and rapid method for fabricating arrays of hollow microneedles uses a photoetchable glass. Furthermore, the glass hollow microneedle array can be used to form a negative mold for replicating microneedles in biocompatible polymers or metals. These microneedle arrays can be used to extract fluids from plants or animals. Glucose transport through these hollow microneedles arrays has been found to be orders of magnitude more rapid than natural diffusion.

Breadboard linear array scan imager using LSI solid-state technology

NASA Technical Reports Server (NTRS)

Tracy, R. A.; Brennan, J. A.; Frankel, D. G.; Noll, R. E.

1976-01-01

The performance of large scale integration photodiode arrays in a linear array scan (pushbroom) breadboard was evaluated for application to multispectral remote sensing of the earth's resources. The technical approach, implementation, and test results of the program are described. Several self scanned linear array visible photodetector focal plane arrays were fabricated and evaluated in an optical bench configuration. A 1728-detector array operating in four bands (0.5 - 1.1 micrometer) was evaluated for noise, spectral response, dynamic range, crosstalk, MTF, noise equivalent irradiance, linearity, and image quality. Other results include image artifact data, temporal characteristics, radiometric accuracy, calibration experience, chip alignment, and array fabrication experience. Special studies and experimentation were included in long array fabrication and real-time image processing for low-cost ground stations, including the use of computer image processing. High quality images were produced and all objectives of the program were attained.

Wafer-scale high-throughput ordered arrays of Si and coaxial Si/Si(1-x)Ge(x) wires: fabrication, characterization, and photovoltaic application.

PubMed

Pan, Caofeng; Luo, Zhixiang; Xu, Chen; Luo, Jun; Liang, Renrong; Zhu, Guang; Wu, Wenzhuo; Guo, Wenxi; Yan, Xingxu; Xu, Jun; Wang, Zhong Lin; Zhu, Jing

2011-08-23

We have developed a method combining lithography and catalytic etching to fabricate large-area (uniform coverage over an entire 5-in. wafer) arrays of vertically aligned single-crystal Si nanowires with high throughput. Coaxial n-Si/p-SiGe wire arrays are also fabricated by further coating single-crystal epitaxial SiGe layers on the Si wires using ultrahigh vacuum chemical vapor deposition (UHVCVD). This method allows precise control over the diameter, length, density, spacing, orientation, shape, pattern and location of the Si and Si/SiGe nanowire arrays, making it possible to fabricate an array of devices based on rationally designed nanowire arrays. A proposed fabrication mechanism of the etching process is presented. Inspired by the excellent antireflection properties of the Si/SiGe wire arrays, we built solar cells based on the arrays of these wires containing radial junctions, an example of which exhibits an open circuit voltage (V(oc)) of 650 mV, a short-circuit current density (J(sc)) of 8.38 mA/cm(2), a fill factor of 0.60, and an energy conversion efficiency (η) of 3.26%. Such a p-n radial structure will have a great potential application for cost-efficient photovoltaic (PV) solar energy conversion. © 2011 American Chemical Society

Fabrication of Pop-up Detector Arrays on Si Wafers

NASA Technical Reports Server (NTRS)

Li, Mary J.; Allen, Christine A.; Gordon, Scott A.; Kuhn, Jonathan L.; Mott, David B.; Stahle, Caroline K.; Wang, Liqin L.

1999-01-01

High sensitivity is a basic requirement for a new generation of thermal detectors. To meet the requirement, close-packed, two-dimensional silicon detector arrays have been developed in NASA Goddard Space Flight Center. The goal of the task is to fabricate detector arrays configured with thermal detectors such as infrared bolometers and x-ray calorimeters to use in space fliGht missions. This paper focuses on the fabrication and the mechanical testing of detector arrays in a 0.2 mm pixel size, the smallest pop-up detectors being developed so far. These array structures, nicknamed "PUDS" for "Pop-Up Detectors", are fabricated on I pm thick, single-crystal, silicon membranes. Their designs have been refined so we can utilize the flexibility of thin silicon films by actually folding the silicon membranes to 90 degrees in order to obtain close-packed two-dimensional arrays. The PUD elements consist of a detector platform and two legs for mechanical support while also serving as electrical and thermal paths. Torsion bars and cantilevers connecting the detector platform to the legs provide additional flexures for strain relief. Using micro-electromechanical structure (MEMS) fabrication techniques, including photolithography, anisotropic chemical etching, reactive-ion etching, and laser dicing, we have fabricated PLTD detector arrays of fourteen designs with a variation of four parameters including cantilever length, torsion bar length and width, and leg length. Folding tests were conducted to test mechanical stress distribution for the array structures. We obtained folding yields and selected optimum design parameters to reach minimal stress levels. Computer simulation was also employed to verify mechanical behaviors of PUDs in the folding process. In addition, scanning electron microscopy was utilized to examine the flatness of detectors and the alignment of detector pixels in arrays. The fabrication of thermistors and heaters on the pop-up detectors is under way, preparing us for the next step of the experiment, the thermal test.

Development of advanced micromirror arrays by flip-chip assembly

NASA Astrophysics Data System (ADS)

Michalicek, M. Adrian; Bright, Victor M.

2001-10-01

This paper presents the design, commercial prefabrication, modeling and testing of advanced micromirror arrays fabricated using a novel, simple and inexpensive flip-chip assembly technique. Several polar piston arrays and rectangular cantilever arrays were fabricated using flip-chip assembly by which the upper layers of the array are fabricated on a separate chip and then transferred to a receiving module containing the lower layers. Typical polar piston arrays boast 98.3% active surface area, highly planarized surfaces, low address potentials compatible with CMOS electronics, highly standardized actuation between devices, and complex segmentation of mirror surfaces which allows for custom aberration configurations. Typical cantilever arrays boast large angles of rotation as well as an average surface planarity of only 1.779 nm of RMS roughness across 100 +m mirrors. Continuous torsion devices offer stable operation through as much as six degrees of rotation while binary operation devices offer stable activated positions with as much as 20 degrees of rotation. All arrays have desirable features of costly fabrication services like five structural layers and planarized mirror surfaces, but are prefabricated in the less costly MUMPs process. Models are developed for all devices and used to compare empirical data.

Fabrication of flexible and vertical silicon nanowire electronics.

PubMed

Weisse, Jeffrey M; Lee, Chi Hwan; Kim, Dong Rip; Zheng, Xiaolin

2012-06-13

Vertical silicon nanowire (SiNW) array devices directly connected on both sides to metallic contacts were fabricated on various non-Si-based substrates (e.g., glass, plastics, and metal foils) in order to fully exploit the nanomaterial properties for final applications. The devices were realized with uniform length Ag-assisted electroless etched SiNW arrays that were detached from their fabrication substrate, typically Si wafers, reattached to arbitrary substrates, and formed with metallic contacts on both sides of the NW array. Electrical characterization of the SiNW array devices exhibits good current-voltage characteristics consistent with the SiNW morphology.

Tunable liquid microlens array driven by pyroelectric effect: full interferometric characterization

NASA Astrophysics Data System (ADS)

Miccio, Lisa; Grilli, Simonetta; Vespini, Veronica; Ferraro, Pietro

2008-09-01

Liquid lenses with adjustable focal length are of great interest in the field of microfluidic devices. They are, usually, realized by electrowetting effect after electrodes patterning on a hydrofobic substrate. Applications are possible in many fields ranging from commercial products such as digital cameras to biological cell sorting. We realized an open array of liquid lenses with adjustable focal length without electrode patterning. We used a z-cut Lithium Niobate crystal (LN) as substrate and few microliters of an oily substance to obtain the droplets array. The spontaneous polarization of LN crystals is reversed by the electric field poling process, thus enabling the realization of periodically poled LN (PPLN) crystals. The substrate consists of a two-dimensional square array of reversed domains with a period around 200 μm. Each domain presents an hexagonal geometry due to the crystal structure. PPLN is first covered by a thin and homogeneous layer of the above mentioned liquid and therefore its temperature is changed by means of a digitally controlled hot plate. During heating and cooling process there is a rearrangement of the liquid layer until it reaches the final topography. Lenses formation is due to the superficial tension changing at the liquid-solid interface by means of the pyroelectric effect. Such effect allows to create a two-dimensional lens pattern of tunable focal length without electrodes. The temporal evolution of both shape and focal length lenses are quantitatively measured by Digital Holographic Microscopy. Array imaging properties and quantitative analysis of the lenses features and aberrations are presented.

Sonochemically Fabricated Microelectrode Arrays for Use as Sensing Platforms

PubMed Central

Collyer, Stuart D.; Davis, Frank; Higson, Séamus P.J.

2010-01-01

The development, manufacture, modification and subsequent utilisation of sonochemically-formed microelectrode arrays is described for a range of applications. Initial fabrication of the sensing platform utilises ultrasonic ablation of electrochemically insulating polymers deposited upon conductive carbon substrates, forming an array of up to 70,000 microelectrode pores cm−2. Electrochemical and optical analyses using these arrays, their enhanced signal response and stir-independence area are all discussed. The growth of conducting polymeric “mushroom” protrusion arrays with entrapped biological entities, thereby forming biosensors is detailed. The simplicity and inexpensiveness of this approach, lending itself ideally to mass fabrication coupled with unrivalled sensitivity and stir independence makes commercial viability of this process a reality. Application of microelectrode arrays as functional components within sensors include devices for detection of chlorine, glucose, ethanol and pesticides. Immunosensors based on microelectrode arrays are described within this monograph for antigens associated with prostate cancer and transient ischemic attacks (strokes). PMID:22399926

Combinatorial fabrication and screening of organic light-emitting device arrays

NASA Astrophysics Data System (ADS)

Shinar, Joseph; Shinar, Ruth; Zhou, Zhaoqun

2007-11-01

The combinatorial fabrication and screening of 2-dimensional (2-d) small molecular UV-violet organic light-emitting device (OLED) arrays, 1-d blue-to-red arrays, 1-d intense white OLED libraries, 1-d arrays to study Förster energy transfer in guest-host OLEDs, and 2-d arrays to study exciplex emission from OLEDs is described. The results demonstrate the power of combinatorial approaches for screening OLED materials and configurations, and for studying their basic properties.

Operational considerations of the Advanced Photovoltaic Solar Array

NASA Technical Reports Server (NTRS)

Stella, Paul M.; Kurland, Richard M.

1992-01-01

Issues affecting the long-term operational performance of the Advanced Photovoltaic Solar Array (APSA) are discussed, with particular attention given to circuit electrical integrity from shadowed and cracked cell modules. The successful integration of individual advanced array components provides a doubling of array specific performance from the previous NASA-developed advanced array (SAFE). Flight test modules both recently fabricated and under fabrication are described. The development of advanced high-performance blanket technology for future APSA enhancement is presented.

Operational considerations of the Advanced Photovoltaic Solar Array

NASA Astrophysics Data System (ADS)

Stella, Paul M.; Kurland, Richard M.

Issues affecting the long-term operational performance of the Advanced Photovoltaic Solar Array (APSA) are discussed, with particular attention given to circuit electrical integrity from shadowed and cracked cell modules. The successful integration of individual advanced array components provides a doubling of array specific performance from the previous NASA-developed advanced array (SAFE). Flight test modules both recently fabricated and under fabrication are described. The development of advanced high-performance blanket technology for future APSA enhancement is presented.

Development of a 1K x 1K GaAs QWIP Far IR Imaging Array

NASA Technical Reports Server (NTRS)

Jhabvala, M.; Choi, K.; Goldberg, A.; La, A.; Gunapala, S.

2003-01-01

In the on-going evolution of GaAs Quantum Well Infrared Photodetectors (QWIPs) we have developed a 1,024 x 1,024 (1K x1K), 8.4-9 microns infrared focal plane array (FPA). This 1 megapixel detector array is a hybrid using the Rockwell TCM 8050 silicon readout integrated circuit (ROIC) bump bonded to a GaAs QWIP array fabricated jointly by engineers at the Goddard Space Flight Center (GSFC) and the Army Research Laboratory (ARL). The finished hybrid is thinned at the Jet Propulsion Lab. Prior to this development the largest format array was a 512 x 640 FPA. We have integrated the 1K x 1K array into an imaging camera system and performed tests over the 40K-90K temperature range achieving BLIP performance at an operating temperature of 76K (f/2 camera system). The GaAs array is relatively easy to fabricate once the superlattice structure of the quantum wells has been defined and grown. The overall arrays costs are currently dominated by the costs associated with the silicon readout since the GaAs array fabrication is based on high yield, well-established GaAs processing capabilities. In this paper we will present the first results of our 1K x 1K QWIP array development including fabrication methodology, test data and our imaging results.

Fabrication of high thermal conductivity arrays of carbon nanotubes and their composites

DOEpatents

Geohegan, David B [Knoxville, TN; Ivanov, Ilya N [Knoxville, TN; Puretzky, Alexander A [Knoxville, TN

2010-07-27

Methods and apparatus are described for fabrication of high thermal conductivity arrays of carbon nanotubes and their composites. A composition includes a vertically aligned nanotube array including a plurality of nanotubes characterized by a property across substantially all of the vertically aligned nanotube array. A method includes depositing a vertically aligned nanotube array that includes a plurality of nanotubes; and controlling a deposition rate of the vertically aligned nanotubes array as a function of an in situ monitored property of the plurality of nanotubes.

Fabrication of a 3D micro/nano dual-scale carbon array and its demonstration as the microelectrodes for supercapacitors

NASA Astrophysics Data System (ADS)

Jiang, Shulan; Shi, Tielin; Gao, Yang; Long, Hu; Xi, Shuang; Tang, Zirong

2014-04-01

An easily accessible method is proposed for the fabrication of a 3D micro/nano dual-scale carbon array with a large surface area. The process mainly consists of three critical steps. Firstly, a hemispherical photoresist micro-array was obtained by the cost-effective nanoimprint lithography process. Then the micro-array was transformed into hierarchical structures with longitudinal nanowires on the microstructure surface by oxygen plasma etching. Finally, the micro/nano dual-scale carbon array was fabricated by carbonizing these hierarchical photoresist structures. It has also been demonstrated that the micro/nano dual-scale carbon array can be used as the microelectrodes for supercapacitors by the electrodeposition of a manganese dioxide (MnO2) film onto the hierarchical carbon structures with greatly enhanced electrochemical performance. The specific gravimetric capacitance of the deposited micro/nano dual-scale microelectrodes is estimated to be 337 F g-1 at the scan rate of 5 mV s-1. This proposed approach of fabricating a micro/nano dual-scale carbon array provides a facile way in large-scale microstructures’ manufacturing for a wide variety of applications, including sensors and on-chip energy storage devices.

Ultrahigh-Density Nanowire Arrays Grown in Self-Assembled Diblock Copolymer Templates

NASA Astrophysics Data System (ADS)

Thurn-Albrecht, T.; Schotter, J.; Kästle, G. A.; Emley, N.; Shibauchi, T.; Krusin-Elbaum, L.; Guarini, K.; Black, C. T.; Tuominen, M. T.; Russell, T. P.

2000-12-01

We show a simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers. The dimensions and lateral density of the array are determined by segmental interactions and the copolymer molecular weight. Through direct current electrodeposition, we fabricated vertical arrays of nanowires with densities in excess of 1.9 × 1011 wires per square centimeter. We found markedly enhanced coercivities with ferromagnetic cobalt nanowires that point toward a route to ultrahigh-density storage media. The copolymer approach described is practical, parallel, compatible with current lithographic processes, and amenable to multilayered device fabrication.

Methods for fabrication of positional and compositionally controlled nanostructures on substrate

DOEpatents

Zhu, Ji; Grunes, Jeff; Choi, Yang-Kyu; Bokor, Jeffrey; Somorjai, Gabor

2013-07-16

Fabrication methods disclosed herein provide for a nanoscale structure or a pattern comprising a plurality of nanostructures of specific predetermined position, shape and composition, including nanostructure arrays having large area at high throughput necessary for industrial production. The resultant nanostracture patterns are useful for nanostructure arrays, specifically sensor and catalytic arrays.

Template-based preparation of free-standing semiconducting polymeric nanorod arrays on conductive substrates.

PubMed

Haberkorn, Niko; Weber, Stefan A L; Berger, Rüdiger; Theato, Patrick

2010-06-01

We describe the synthesis and characterization of a cross-linkable siloxane-derivatized tetraphenylbenzidine (DTMS-TPD), which was used for the fabrication of semiconducting highly ordered nanorod arrays on conductive indium tin oxide or Pt-coated substrates. The stepwise process allow fabricating of macroscopic areas of well-ordered free-standing nanorod arrays, which feature a high resistance against organic solvents, semiconducting properties and a good adhesion to the substrate. Thin films of the TPD derivate with good hole-conducting properties could be prepared by cross-linking and covalently attaching to hydroxylated substrates utilizing an initiator-free thermal curing at 160 degrees C. The nanorod arrays composed of cross-linked DTMS-TPD were fabricated by an anodic aluminum oxide (AAO) template approach. Furthermore, the nanorod arrays were investigated by a recently introduced method allowing to probe local conductivity on fragile structures. It revealed that more than 98% of the nanorods exhibit electrical conductance and consequently feature a good electrical contact to the substrate. The prepared nanorod arrays have the potential to find application in the fabrication of multilayered device architectures for building well-ordered bulk-heterojunction solar cells.

EML Array fabricated by SAG technique monolithically integrated with a buried ridge AWG multiplexer

NASA Astrophysics Data System (ADS)

Xu, Junjie; Liang, Song; Zhang, Zhike; An, Junming; Zhu, Hongliang; Wang, Wei

2017-06-01

We report the fabrication of a ten channel electroabsorption modulated DFB laser (EML) array. Different emission wavelengths of the laser array are obtained by selective area growth (SAG) technique, which is also used for the integration of electroabsorption modulators (EAM) with the lasers. An arrayed waveguide grating (AWG) combiner is integrated monolithically with the laser array by butt-joint regrowth (BJR) technique. A buried ridge waveguide structure is adopted for the AWG combiner. A self aligned fabrication procedure is adopted for the fabrication of the waveguide structure of the device to eliminate the misalignment between the laser active waveguide and the passive waveguide. A Ti thin film heater is integrated for each laser in the array. With the help of the heaters, ten laser emissions with 1.8 nm channel spacing are obtained. The integrated EAM has a larger than 11 dB static extinction ratios and larger than 8 GHz small signal modulation bandwidths. The light power collected in the output waveguide of the AWG is larger than -13 dBm for each wavelength.

The fabrication of highly ordered block copolymer micellar arrays: control of the separation distances of silicon oxide dots

NASA Astrophysics Data System (ADS)

Yoo, Hana; Park, Soojin

2010-06-01

We demonstrate the fabrication of highly ordered silicon oxide dotted arrays prepared from polydimethylsiloxane (PDMS) filled nanoporous block copolymer (BCP) films and the preparation of nanoporous, flexible Teflon or polyimide films. Polystyrene-block-poly(2-vinylpyridine) (PS-b-P2VP) films were annealed in toluene vapor to enhance the lateral order of micellar arrays and were subsequently immersed in alcohol to produce nano-sized pores, which can be used as templates for filling a thin layer of PDMS. When a thin layer of PDMS was spin-coated onto nanoporous BCP films and thermally annealed at a certain temperature, the PDMS was drawn into the pores by capillary action. PDMS filled BCP templates were exposed to oxygen plasma environments in order to fabricate silicon oxide dotted arrays. By addition of PS homopolymer to PS-b-P2VP copolymer, the separation distances of micellar arrays were tuned. As-prepared silicon oxide dotted arrays were used as a hard master for fabricating nanoporous Teflon or polyimide films by spin-coating polymer precursor solutions onto silicon patterns and peeling off. This simple process enables us to fabricate highly ordered nanoporous BCP templates, silicon oxide dots, and flexible nanoporous polymer patterns with feature size of sub-20 nm over 5 cm × 5 cm.

The fabrication of highly ordered block copolymer micellar arrays: control of the separation distances of silicon oxide dots.

PubMed

Yoo, Hana; Park, Soojin

2010-06-18

We demonstrate the fabrication of highly ordered silicon oxide dotted arrays prepared from polydimethylsiloxane (PDMS) filled nanoporous block copolymer (BCP) films and the preparation of nanoporous, flexible Teflon or polyimide films. Polystyrene-block-poly(2-vinylpyridine) (PS-b-P2VP) films were annealed in toluene vapor to enhance the lateral order of micellar arrays and were subsequently immersed in alcohol to produce nano-sized pores, which can be used as templates for filling a thin layer of PDMS. When a thin layer of PDMS was spin-coated onto nanoporous BCP films and thermally annealed at a certain temperature, the PDMS was drawn into the pores by capillary action. PDMS filled BCP templates were exposed to oxygen plasma environments in order to fabricate silicon oxide dotted arrays. By addition of PS homopolymer to PS-b-P2VP copolymer, the separation distances of micellar arrays were tuned. As-prepared silicon oxide dotted arrays were used as a hard master for fabricating nanoporous Teflon or polyimide films by spin-coating polymer precursor solutions onto silicon patterns and peeling off. This simple process enables us to fabricate highly ordered nanoporous BCP templates, silicon oxide dots, and flexible nanoporous polymer patterns with feature size of sub-20 nm over 5 cm x 5 cm.

Spatial and Angular Resolution Enhancement of Light Fields Using Convolutional Neural Networks

NASA Astrophysics Data System (ADS)

Gul, M. Shahzeb Khan; Gunturk, Bahadir K.

2018-05-01

Light field imaging extends the traditional photography by capturing both spatial and angular distribution of light, which enables new capabilities, including post-capture refocusing, post-capture aperture control, and depth estimation from a single shot. Micro-lens array (MLA) based light field cameras offer a cost-effective approach to capture light field. A major drawback of MLA based light field cameras is low spatial resolution, which is due to the fact that a single image sensor is shared to capture both spatial and angular information. In this paper, we present a learning based light field enhancement approach. Both spatial and angular resolution of captured light field is enhanced using convolutional neural networks. The proposed method is tested with real light field data captured with a Lytro light field camera, clearly demonstrating spatial and angular resolution improvement.

Spatial and Angular Resolution Enhancement of Light Fields Using Convolutional Neural Networks.

PubMed

Gul, M Shahzeb Khan; Gunturk, Bahadir K

2018-05-01

Light field imaging extends the traditional photography by capturing both spatial and angular distribution of light, which enables new capabilities, including post-capture refocusing, post-capture aperture control, and depth estimation from a single shot. Micro-lens array (MLA) based light field cameras offer a cost-effective approach to capture light field. A major drawback of MLA based light field cameras is low spatial resolution, which is due to the fact that a single image sensor is shared to capture both spatial and angular information. In this paper, we present a learning based light field enhancement approach. Both spatial and angular resolution of captured light field is enhanced using convolutional neural networks. The proposed method is tested with real light field data captured with a Lytro light field camera, clearly demonstrating spatial and angular resolution improvement.

Non-interferometric phase retrieval using refractive index manipulation

PubMed Central

Chen, Chyong-Hua; Hsu, Hsin-Feng; Chen, Hou-Ren; Hsieh, Wen-Feng

2017-01-01

We present a novel, inexpensive and non-interferometric technique to retrieve phase images by using a liquid crystal phase shifter without including any physically moving parts. First, we derive a new equation of the intensity-phase relation with respect to the change of refractive index, which is similar to the transport of the intensity equation. The equation indicates that this technique is unneeded to consider the variation of magnifications between optical images. For proof of the concept, we use a liquid crystal mixture MLC 2144 to manufacture a phase shifter and to capture the optical images in a rapid succession by electrically tuning the applied voltage of the phase shifter. Experimental results demonstrate that this technique is capable of reconstructing high-resolution phase images and to realize the thickness profile of a microlens array quantitatively. PMID:28387382

Simple and fast method for fabrication of endoscopic implantable sensor arrays.

PubMed

Tahirbegi, I Bogachan; Alvira, Margarita; Mir, Mònica; Samitier, Josep

2014-06-26

Here we have developed a simple method for the fabrication of disposable implantable all-solid-state ion-selective electrodes (ISE) in an array format without using complex fabrication equipment or clean room facilities. The electrodes were designed in a needle shape instead of planar electrodes for a full contact with the tissue. The needle-shape platform comprises 12 metallic pins which were functionalized with conductive inks and ISE membranes. The modified microelectrodes were characterized with cyclic voltammetry, scanning electron microscope (SEM), and optical interferometry. The surface area and roughness factor of each microelectrode were determined and reproducible values were obtained for all the microelectrodes on the array. In this work, the microelectrodes were modified with membranes for the detection of pH and nitrate ions to prove the reliability of the fabricated sensor array platform adapted to an endoscope.

Fabrication of large area nanoprism arrays and their application for surface enhanced Raman spectroscopy

NASA Astrophysics Data System (ADS)

Cui, B.; Clime, L.; Li, K.; Veres, T.

2008-04-01

This work demonstrates the fabrication of metallic nanoprism (triangular nanostructure) arrays using a low-cost and high-throughput process. In the method, the triangular structure is defined by the shadow of a pyramid during angle evaporation of a metal etching mask. The pyramids were created by nanoimprint lithography in polymethylmethacrylate (PMMA) using a mould having an inverse-pyramid-shaped hole array formed by KOH wet etching of silicon. Silver and gold nanoprism arrays with a period of 200 nm and an edge length of 100 nm have been fabricated and used as effective substrates for surface enhanced Raman spectroscopy (SERS) detection of rhodamine 6G (R6G) molecules. Numerical calculations confirmed the great enhancement of electric field near the sharp nanoprism corners, as well as the detrimental effect of the chromium adhesion layer on localized surface plasmon resonance. The current method can also be used to fabricate non-equilateral nanoprism and three-dimensional (3D) nanopyramid arrays, and it can be readily extended to other metals.

Fabrication of large area nanoprism arrays and their application for surface enhanced Raman spectroscopy.

PubMed

Cui, B; Clime, L; Li, K; Veres, T

2008-04-09

This work demonstrates the fabrication of metallic nanoprism (triangular nanostructure) arrays using a low-cost and high-throughput process. In the method, the triangular structure is defined by the shadow of a pyramid during angle evaporation of a metal etching mask. The pyramids were created by nanoimprint lithography in polymethylmethacrylate (PMMA) using a mould having an inverse-pyramid-shaped hole array formed by KOH wet etching of silicon. Silver and gold nanoprism arrays with a period of 200 nm and an edge length of 100 nm have been fabricated and used as effective substrates for surface enhanced Raman spectroscopy (SERS) detection of rhodamine 6G (R6G) molecules. Numerical calculations confirmed the great enhancement of electric field near the sharp nanoprism corners, as well as the detrimental effect of the chromium adhesion layer on localized surface plasmon resonance. The current method can also be used to fabricate non-equilateral nanoprism and three-dimensional (3D) nanopyramid arrays, and it can be readily extended to other metals.

Design and Fabrication Highlights Enabling a 2 mm, 128 Element Bolometer Array for GISMO

NASA Technical Reports Server (NTRS)

Allen, Christine; Benford, Dominic; Miller, Timothy; Staguhn, Johannes; Wollack, Edward; Moseley, Harvey

2007-01-01

The Backshort-Under-Grid (BUG) superconducting bolometer array architecture is intended to be highly versatile, operating in a large range of wavelengths and background conditions. We have undertaken a three-year program to develop key technologies and processes required to build kilopixel arrays. To validate the basic array design and to demonstrate its applicability for future kilopixel arrays, we have chosen to demonstrate a 128 element bolometer array optimized for 2 mm wavelength using a newly built Goddard instrument, GISMO (Goddard /RAM Superconducting 2-millimeter Observer). The arrays are fabricated using batch wafer processing developed and optimized for high pixel yield, low noise, and high uniformity. The molybdenum-gold superconducting transition edge sensors are fabricated using batch sputter deposition and are patterned using dry etch techniques developed at Goddard. With a detector pitch of 2 mm 8x16 array for GISMO occupies nearly one half of the processing area of a 100 mm silicon-on-insulator starting wafer. Two such arrays are produced from a single wafer along with witness samples for process characterization. To provide thermal isolation for the detector elements, at the end of the process over 90% of the silicon must be removed using deep reactive ion etching techniques. The electrical connections for each bolometer element are patterned on the top edge of the square grid supporting the array. The design considerations unique to GISMO, key fabrication challenges, and laboratory experimental results will be presented.

Design and fabrication of a high temperature leading edge heating array, phase 1

NASA Technical Reports Server (NTRS)

1972-01-01

Progress during a Phase 1 program to design a high temperature heating array is reported for environmentally testing full-scale shuttle leading edges (30 inch span, 6 to 15 inch radius) at flight heating rates and pressures. Heat transfer analyses of the heating array, individual modules, and the shuttle leading edge were performed, which influenced the array design, and the design, fabrication, and testing of a prototype heater module.

Solid state image sensing arrays

NASA Technical Reports Server (NTRS)

Sadasiv, G.

1972-01-01

The fabrication of a photodiode transistor image sensor array in silicon, and tests on individual elements of the array are described along with design for a scanning system for an image sensor array. The spectral response of p-n junctions was used as a technique for studying the optical-absorption edge in silicon. Heterojunction structures of Sb2S3- Si were fabricated and a system for measuring C-V curves on MOS structures was built.

A hollow stainless steel microneedle array to deliver insulin to a diabetic rat

NASA Astrophysics Data System (ADS)

Vinayakumar, K. B.; Kulkarni, Prachit G.; Nayak, M. M.; Dinesh, N. S.; Hegde, Gopalkrishna M.; Ramachandra, S. G.; Rajanna, K.

2016-06-01

A novel fabrication process has been described for the development of a hollow stainless steel microneedle array using femto second laser micromachining. Using this method, a complicated microstructure can be fabricated in a single process step without using masks. The mechanical stability of the fabricated microneedle array was measured for axial and transverse loading. Skin histology was carried out to study the microneedle penetration into the rat skin. Fluid flow through the microneedle array was studied for different inlet pressures. The packaging of the microneedle array, to protect the microneedle bore blockage from dust and other atmospheric contaminations, was also considered. Finally, the microneedle array was tested and studied in vivo for insulin delivery to a diabetic rat. The results obtained were compared with the standard subcutaneous delivery with the same dose rate and were found to be in good agreement.

Fabrication and optical characterization of imaging fiber-based nanoarrays.

PubMed

Tam, Jenny M; Song, Linan; Walt, David R

2005-09-15

In this paper, we present a technique for fabricating arrays containing a density at least 90 times higher than previously published. Specifically, we discuss the fabrication of two imaging fiber-based nanoarrays, one with 700nm features, another with 300nm features. With arrays containing up to 4.5x10(6) array elements/mm(2), these nanoarrays have an ultra-high packing density. A straightforward etching protocol is used to create nanowells into which beads can be deposited. These beads comprise the sensing elements of the nanoarray. Deposition of the nanobeads into the nanowells using two techniques is described. The surface characteristics of the etched arrays are examined with atomic force microscopy and scanning electron microscopy. Fluorescence microscopy was used to observe the arrays. The 300nm array features and the 500nm center-to-center distance approach the minimum feature sizes viewable using conventional light microscopy.

Wideband Array for C, X, and Ku-Band Applications with 5.3:1 Bandwidth

NASA Technical Reports Server (NTRS)

Novak, Markus H.; Volakis, John L.; Miranda, Felix A.

2015-01-01

Planar arrays that exploit strong intentional coupling between elements have allowed for very wide bandwidths in low-profile configurations. However, such designs also require complex impedance matching networks that must also be very compact. For many space applications, typically occurring at C-, X-, Ku-, and most recently at Ka-band, such designs require specialized and expensive fabrication techniques. To address this issue, a novel ultra-wideband array is presented, using a simplified feed network to reduce fabrication cost. The array operates from 3.5-18.5 GHz with VSWR less than 2.4 at broadside, and is of very low profile, having a total height of lambda/10 at the lowest frequency of operation. Validation is provided using a 64-element prototype array, fabricated using common Printed Circuit Board (PCB) technology. The low size, weight, and cost of this array make it attractive for space-borne applications.

Maskless wafer-level microfabrication of optical penetrating neural arrays out of soda-lime glass: Utah Optrode Array.

PubMed

Boutte, Ronald W; Blair, Steve

2016-12-01

Borrowing from the wafer-level fabrication techniques of the Utah Electrode Array, an optical array capable of delivering light for neural optogenetic studies is presented in this paper: the Utah Optrode Array. Utah Optrode Arrays are micromachined out of sheet soda-lime-silica glass using standard backend processes of the semiconductor and microelectronics packaging industries such as precision diamond grinding and wet etching. 9 × 9 arrays with 1100μ m × 100μ m optrodes and a 500μ m back-plane are repeatably reproduced on 2i n wafers 169 arrays at a time. This paper describes the steps and some of the common errors of optrode fabrication.

PMN-PT Single-Crystal High-Frequency Kerfless Phased Array

PubMed Central

Chen, Ruimin; Cabrera-Munoz, Nestor E.; Lam, Kwok Ho; Hsu, Hsiu-sheng; Zheng, Fan; Zhou, Qifa; Shung, K. Kirk

2015-01-01

This paper reports the design, fabrication, and characterization of a miniature high-frequency kerfless phased array prepared from a PMN-PT single crystal for forward-looking intravascular or endoscopic imaging applications. After lapping down to around 40 μm, the PMN-PT material was utilized to fabricate 32-element kerfless phased arrays using micromachining techniques. The aperture size of the active area was only 1.0 × 1.0 mm. The measured results showed that the array had a center frequency of 40 MHz, a bandwidth of 34% at −6 dB with a polymer matching layer, and an insertion loss of 20 dB at the center frequency. Phantom images were acquired and compared with simulated images. The results suggest that the feasibility of developing a phased array mounted at the tip of a forward-looking intravascular catheter or endoscope. The fabricated array exhibits much higher sensitivity than PZT ceramic-based arrays and demonstrates that PMN-PT is well suited for this application. PMID:24859667

Large-scale fabrication of single crystalline tin nanowire arrays

NASA Astrophysics Data System (ADS)

Luo, Bin; Yang, Dachi; Liang, Minghui; Zhi, Linjie

2010-09-01

Large-scale single crystalline tin nanowire arrays with preferred lattice orientation along the [100] direction were fabricated in porous anodic aluminium oxide (AAO) membranes by the electrodeposition method using copper nanorod as a second electrode.Large-scale single crystalline tin nanowire arrays with preferred lattice orientation along the [100] direction were fabricated in porous anodic aluminium oxide (AAO) membranes by the electrodeposition method using copper nanorod as a second electrode. Electronic supplementary information (ESI) available: Experimental details and the information for single crystalline copper nanorods. See DOI: 10.1039/c0nr00206b

Miniature curved artificial compound eyes

PubMed Central

Floreano, Dario; Pericet-Camara, Ramon; Viollet, Stéphane; Ruffier, Franck; Brückner, Andreas; Leitel, Robert; Buss, Wolfgang; Menouni, Mohsine; Expert, Fabien; Juston, Raphaël; Dobrzynski, Michal Karol; L’Eplattenier, Geraud; Recktenwald, Fabian; Mallot, Hanspeter A.; Franceschini, Nicolas

2013-01-01

In most animal species, vision is mediated by compound eyes, which offer lower resolution than vertebrate single-lens eyes, but significantly larger fields of view with negligible distortion and spherical aberration, as well as high temporal resolution in a tiny package. Compound eyes are ideally suited for fast panoramic motion perception. Engineering a miniature artificial compound eye is challenging because it requires accurate alignment of photoreceptive and optical components on a curved surface. Here, we describe a unique design method for biomimetic compound eyes featuring a panoramic, undistorted field of view in a very thin package. The design consists of three planar layers of separately produced arrays, namely, a microlens array, a neuromorphic photodetector array, and a flexible printed circuit board that are stacked, cut, and curved to produce a mechanically flexible imager. Following this method, we have prototyped and characterized an artificial compound eye bearing a hemispherical field of view with embedded and programmable low-power signal processing, high temporal resolution, and local adaptation to illumination. The prototyped artificial compound eye possesses several characteristics similar to the eye of the fruit fly Drosophila and other arthropod species. This design method opens up additional vistas for a broad range of applications in which wide field motion detection is at a premium, such as collision-free navigation of terrestrial and aerospace vehicles, and for the experimental testing of insect vision theories. PMID:23690574

Imaging through turbulence using a plenoptic sensor

NASA Astrophysics Data System (ADS)

Wu, Chensheng; Ko, Jonathan; Davis, Christopher C.

2015-09-01

Atmospheric turbulence can significantly affect imaging through paths near the ground. Atmospheric turbulence is generally treated as a time varying inhomogeneity of the refractive index of the air, which disrupts the propagation of optical signals from the object to the viewer. Under circumstances of deep or strong turbulence, the object is hard to recognize through direct imaging. Conventional imaging methods can't handle those problems efficiently. The required time for lucky imaging can be increased significantly and the image processing approaches require much more complex and iterative de-blurring algorithms. We propose an alternative approach using a plenoptic sensor to resample and analyze the image distortions. The plenoptic sensor uses a shared objective lens and a microlens array to form a mini Keplerian telescope array. Therefore, the image obtained by a conventional method will be separated into an array of images that contain multiple copies of the object's image and less correlated turbulence disturbances. Then a highdimensional lucky imaging algorithm can be performed based on the collected video on the plenoptic sensor. The corresponding algorithm will select the most stable pixels from various image cells and reconstruct the object's image as if there is only weak turbulence effect. Then, by comparing the reconstructed image with the recorded images in each MLA cell, the difference can be regarded as the turbulence effects. As a result, the retrieval of the object's image and extraction of turbulence effect can be performed simultaneously.

Fabrication of polymeric nano-batteries array using anodic aluminum oxide templates.

PubMed

Zhao, Qiang; Cui, Xiaoli; Chen, Ling; Liu, Ling; Sun, Zhenkun; Jiang, Zhiyu

2009-02-01

Rechargeable nano-batteries were fabricated in the array pores of anodic aluminum oxide (AAO) template, combining template method and electrochemical method. The battery consisted of electropolymerized PPy electrode, porous TiO2 separator, and chemically polymerized PAn electrode was fabricated in the array pores of two-step anodizing aluminum oxide (AAO) membrane, based on three-step assembling method. It performs typical electrochemical battery behavior with good charge-discharge ability, and presents a capacity of 25 nAs. AFM results show the hexagonal array of nano-batteries' top side. The nano-battery may be a promising device for the development of Micro-Electro-Mechanical Systems (MEMS), and Nano-Electro-Mechanical Systems (NEMS).

Ultrahigh-density nanowire arrays grown in self-assembled diblock copolymer templates.

PubMed

Thurn-Albrecht, T; Schotter, J; Kästle, G A; Emley, N; Shibauchi, T; Krusin-Elbaum, L; Guarini, K; Black, C T; Tuominen, M T; Russell, T P

2000-12-15

We show a simple, robust, chemical route to the fabrication of ultrahigh-density arrays of nanopores with high aspect ratios using the equilibrium self-assembled morphology of asymmetric diblock copolymers. The dimensions and lateral density of the array are determined by segmental interactions and the copolymer molecular weight. Through direct current electrodeposition, we fabricated vertical arrays of nanowires with densities in excess of 1.9 x 10(11) wires per square centimeter. We found markedly enhanced coercivities with ferromagnetic cobalt nanowires that point toward a route to ultrahigh-density storage media. The copolymer approach described is practical, parallel, compatible with current lithographic processes, and amenable to multilayered device fabrication.

An adaptive liquid microlens driven by a ferrofluidic transducer

NASA Astrophysics Data System (ADS)

Xiao, Wenjia; Hardt, Steffen

2010-05-01

Ferrofluids behave superparamagnetically and can be manipulated by external magnetic fields, providing numerous applications in microfluidic systems. In this paper, an adaptive liquid microlens driven by a ferrofluidic actuator is presented. The microlens consists of a cylindrical well filled with a lens liquid connected to a microchannel containing a ferrofluid plug. When the ferrofluid plug is moved back and forth by an external magnetic field, the lens liquid is displaced, forming a liquid lens with an adaptive focus in the cylindrical well. The focal length of the lens can be changed from infinity to the scale of the radius of the cylindrical well, leading to a high optical power compared to conventional liquid lenses utilizing liquid crystals or electrowetting. The lens curvature is reversibly tunable without hysteresis when the ferrofluid plug moves with a speed below a specific threshold value. The lens can be acted on by a magnetic field of about 100 mT which can be generated by microcoils requiring much lower voltages than the electrowetting principle.

Single Quantum Dot with Microlens and 3D-Printed Micro-objective as Integrated Bright Single-Photon Source

PubMed Central

2017-01-01

Integrated single-photon sources with high photon-extraction efficiency are key building blocks for applications in the field of quantum communications. We report on a bright single-photon source realized by on-chip integration of a deterministic quantum dot microlens with a 3D-printed multilens micro-objective. The device concept benefits from a sophisticated combination of in situ 3D electron-beam lithography to realize the quantum dot microlens and 3D femtosecond direct laser writing for creation of the micro-objective. In this way, we obtain a high-quality quantum device with broadband photon-extraction efficiency of (40 ± 4)% and high suppression of multiphoton emission events with g(2)(τ = 0) < 0.02. Our results highlight the opportunities that arise from tailoring the optical properties of quantum emitters using integrated optics with high potential for the further development of plug-and-play fiber-coupled single-photon sources. PMID:28670600

Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems.

PubMed

Baranski, Maciej; Bargiel, Sylwester; Passilly, Nicolas; Gorecki, Christophe; Jia, Chenping; Frömel, Jörg; Wiemer, Maik

2015-08-01

This paper presents the optical design of a miniature 3D scanning system, which is fully compatible with the vertical integration technology of micro-opto-electro-mechanical systems (MOEMS). The constraints related to this integration strategy are considered, resulting in a simple three-element micro-optical setup based on an afocal scanning microlens doublet and a focusing microlens, which is tolerant to axial position inaccuracy. The 3D scanning is achieved by axial and lateral displacement of microlenses of the scanning doublet, realized by micro-electro-mechanical systems microactuators (the transmission scanning approach). Optical scanning performance of the system is determined analytically by use of the extended ray transfer matrix method, leading to two different optical configurations, relying either on a ball lens or plano-convex microlenses. The presented system is aimed to be a core component of miniature MOEMS-based optical devices, which require a 3D optical scanning function, e.g., miniature imaging systems (confocal or optical coherence microscopes) or optical tweezers.

3D micro-lenses for free space intra-chip coupling in photonic-integrated circuits (Conference Presentation)

NASA Astrophysics Data System (ADS)

Thomas, Robert; Williams, Gwilym I.; Ladak, Sam; Smowton, Peter M.

2017-02-01

The integration of multiple optical elements on a common substrate to create photonic integrated circuits (PIC) has been successfully applied in: fibre-optic communications, photonic computing and optical sensing. The push towards III-Vs on silicon promises a new generation of integrated devices that combine the advantages of both integrated electronics and optics in a single substrate. III-V edge emitting laser diodes offer high efficiency and low threshold currents making them ideal candidates for the optically active elements of the next generation of PICs. Nevertheless, the highly divergent and asymmetric beam shapes intrinsic to these devices limits the efficiency with which optical elements can be free space coupled intra-chip; a capability particularly desirable for optical sensing applications e.g. [1]. Furthermore, the monolithic nature of the integrated approach prohibits the use of macroscopic lenses to improve coupling. However, with the advent of 3D direct laser writing, three dimensional lenses can now be manufactured on a microscopic-scale [2], making the use of micro-lens technology for enhanced free space coupling of integrated optical elements feasible. Here we demonstrate the first use of 3D micro-lenses to improve the coupling efficiency of monolithically integrated lasers. Fabricated from IP-dip photoresist using a Nanoscribe GmbH 3D lithography tool, the lenses are embedded directly onto a structured GaInP/AlGaInP substrate containing arrays of ridge lasers free space coupled to one another via a 200 μm air gap. We compare the coupling efficiency of these lasers with and without micro-lenses through photo-voltage and beam profile measurements and discuss optimisation of lens design.

Micro-optical artificial compound eyes.

PubMed

Duparré, J W; Wippermann, F C

2006-03-01

Natural compound eyes combine small eye volumes with a large field of view at the cost of comparatively low spatial resolution. For small invertebrates such as flies or moths, compound eyes are the perfectly adapted solution to obtaining sufficient visual information about their environment without overloading their brains with the necessary image processing. However, to date little effort has been made to adopt this principle in optics. Classical imaging always had its archetype in natural single aperture eyes which, for example, human vision is based on. But a high-resolution image is not always required. Often the focus is on very compact, robust and cheap vision systems. The main question is consequently: what is the better approach for extremely miniaturized imaging systems-just scaling of classical lens designs or being inspired by alternative imaging principles evolved by nature in the case of small insects? In this paper, it is shown that such optical systems can be achieved using state-of-the-art micro-optics technology. This enables the generation of highly precise and uniform microlens arrays and their accurate alignment to the subsequent optics-, spacing- and optoelectronics structures. The results are thin, simple and monolithic imaging devices with a high accuracy of photolithography. Two different artificial compound eye concepts for compact vision systems have been investigated in detail: the artificial apposition compound eye and the cluster eye. Novel optical design methods and characterization tools were developed to allow the layout and experimental testing of the planar micro-optical imaging systems, which were fabricated for the first time by micro-optics technology. The artificial apposition compound eye can be considered as a simple imaging optical sensor while the cluster eye is capable of becoming a valid alternative to classical bulk objectives but is much more complex than the first system.

A 2-D Array of Superconducting Magnesium Diboride (MgB2) Far-IR Thermal Detectors for Planetary Exploration

NASA Technical Reports Server (NTRS)

Lakew, Brook

2009-01-01

A 2-D array of superconducting Magnesium Diboride(MgB2) far IR thermal detectors has been fabricated. Such an array is intended to be at the focal plane of future generation thermal imaging far-IR instruments that will investigate the outer planets and their icy moons. Fabrication and processing of the pixels of the array as well as noise characterization of architectured MgB2 thin films will be presented. Challenges and solutions for improving the performance of the array will be discussed.

Large-scale fabrication of single crystalline tin nanowire arrays.

PubMed

Luo, Bin; Yang, Dachi; Liang, Minghui; Zhi, Linjie

2010-09-01

Large-scale single crystalline tin nanowire arrays with preferred lattice orientation along the [100] direction were fabricated in porous anodic aluminium oxide (AAO) membranes by the electrodeposition method using copper nanorod as a second electrode.

Fabrication of an Absorber-Coupled MKID Detector and Readout for Sub-Millimeter and Far-Infrared Astronomy

NASA Technical Reports Server (NTRS)

Brown, Ari-David; Hsieh, Wen-Ting; Moseley, S. Harvey; Stevenson, Thomas R.; U-yen, Kongpop; Wollack, Edward J.

2010-01-01

We have fabricated absorber-coupled microwave kinetic inductance detector (MKID) arrays for sub-millimeter and far-infrared astronomy. Each detector array is comprised of lambda/2 stepped impedance resonators, a 1.5 micrometer thick silicon membrane, and 380 micrometer thick silicon walls. The resonators consist of parallel plate aluminum transmission lines coupled to low impedance Nb microstrip traces of variable length, which set the resonant frequency of each resonator. This allows for multiplexed microwave readout and, consequently, good spatial discrimination between pixels in the array. The Al transmission lines simultaneously act to absorb optical power and are designed to have a surface impedance and filling fraction so as to match the impedance of free space. Our novel fabrication techniques demonstrate high fabrication yield of MKID arrays on large single crystal membranes and sub-micron front-to-back alignment of the microstrip circuit.

Fabrication of an Absorber-Coupled MKID Detector and Readout for Sub-Millimeter and Far-Infrared Astronomy

NASA Technical Reports Server (NTRS)

Brown, Ari-David; Hsieh, Wen-Ting; Moseley, S. Harvey; Stevenson, Thomas R.; U-yen, Kongpop; Wollack, Edward J.

2010-01-01

We have fabricated absorber-coupled microwave kinetic inductance detector (MKID) arrays for sub-millimeter and farinfrared astronomy. Each detector array is comprised of lambda/2 stepped impedance resonators, a 1.5µm thick silicon membrane, and 380µm thick silicon walls. The resonators consist of parallel plate aluminum transmission lines coupled to low impedance Nb microstrip traces of variable length, which set the resonant frequency of each resonator. This allows for multiplexed microwave readout and, consequently, good spatial discrimination between pixels in the array. The Al transmission lines simultaneously act to absorb optical power and are designed to have a surface impedance and filling fraction so as to match the impedance of free space. Our novel fabrication techniques demonstrate high fabrication yield of MKID arrays on large single crystal membranes and sub-micron front-to-back alignment of the microstrip circuit.

Simple and Fast Method for Fabrication of Endoscopic Implantable Sensor Arrays

PubMed Central

Tahirbegi, I. Bogachan; Alvira, Margarita; Mir, Mònica; Samitier, Josep

2014-01-01

Here we have developed a simple method for the fabrication of disposable implantable all-solid-state ion-selective electrodes (ISE) in an array format without using complex fabrication equipment or clean room facilities. The electrodes were designed in a needle shape instead of planar electrodes for a full contact with the tissue. The needle-shape platform comprises 12 metallic pins which were functionalized with conductive inks and ISE membranes. The modified microelectrodes were characterized with cyclic voltammetry, scanning electron microscope (SEM), and optical interferometry. The surface area and roughness factor of each microelectrode were determined and reproducible values were obtained for all the microelectrodes on the array. In this work, the microelectrodes were modified with membranes for the detection of pH and nitrate ions to prove the reliability of the fabricated sensor array platform adapted to an endoscope. PMID:24971473

Effect of Refractive Index of Substrate on Fabrication and Optical Properties of Hybrid Au-Ag Triangular Nanoparticle Arrays

PubMed Central

Liu, Jing; Chen, Yushan; Cai, Haoyuan; Chen, Xiaoyi; Li, Changwei; Yang, Cheng-Fu

2015-01-01

In this study, the nanosphere lithography (NSL) method was used to fabricate hybrid Au-Ag triangular periodic nanoparticle arrays. The Au-Ag triangular periodic arrays were grown on different substrates, and the effect of the refractive index of substrates on fabrication and optical properties was systematically investigated. At first, the optical spectrum was simulated by the discrete dipole approximation (DDA) numerical method as a function of refractive indexes of substrates and mediums. Simulation results showed that as the substrates had the refractive indexes of 1.43 (quartz) and 1.68 (SF5 glass), the nanoparticle arrays would have better refractive index sensitivity (RIS) and figure of merit (FOM). Simulation results also showed that the peak wavelength of the extinction spectra had a red shift when the medium’s refractive index n increased. The experimental results also demonstrated that when refractive indexes of substrates were 1.43 and 1.68, the nanoparticle arrays and substrate had better adhesive ability. Meanwhile, we found the nanoparticles formed a large-scale monolayer array with the hexagonally close-packed structure. Finally, the hybrid Au-Ag triangular nanoparticle arrays were fabricated on quartz and SF5 glass substrates and their experiment extinction spectra were compared with the simulated results.

Realization of integral 3-dimensional image using fabricated tunable liquid lens array

NASA Astrophysics Data System (ADS)

Lee, Muyoung; Kim, Junoh; Kim, Cheol Joong; Lee, Jin Su; Won, Yong Hyub

2015-03-01

Electrowetting has been widely studied for various optical applications such as optical switch, sensor, prism, and display. In this study, vari-focal liquid lens array is developed using electrowetting principle to construct integral 3-dimensional imaging. The electrowetting principle that changes the surface tension by applying voltage has several advantages to realize active optical device such as fast response time, low electrical consumption, and no mechanical moving parts. Two immiscible liquids that are water and oil are used for forming lens. By applying a voltage to the water, the focal length of the lens could be tuned as changing contact angle of water. The fabricated electrowetting vari-focal liquid lens array has 1mm diameter spherical lens shape that has 1.6mm distance between each lens. The number of lenses on the panel is 23x23 and the focal length of the lens array is simultaneously tuned from -125 to 110 diopters depending on the applied voltage. The fabricated lens array is implemented to integral 3-dimensional imaging. A 3D object is reconstructed by fabricated liquid lens array with 23x23 elemental images that are generated by 3D max tools. When liquid lens array is tuned as convex state. From vari-focal liquid lens array implemented integral imaging system, we expect that depth enhanced integral imaging can be realized in the near future.

OGLE-2015-BLG-0196: GROUND-BASED GRAVITATIONAL MICROLENS PARALLAX CONFIRMED BY SPACE-BASED OBSERVATION

DOE Office of Scientific and Technical Information (OSTI.GOV)

Han, C.; Udalski, A.; Szymański, M. K.

2017-01-01

In this paper, we present an analysis of the binary gravitational microlensing event OGLE-2015-BLG-0196. The event lasted for almost a year, and the light curve exhibited significant deviations from the lensing model based on the rectilinear lens-source relative motion, enabling us to measure the microlens parallax. The ground-based microlens parallax is confirmed by the data obtained from space-based microlens observations using the Spitzer telescope. By additionally measuring the angular Einstein radius from the analysis of the resolved caustic crossing, the physical parameters of the lens are determined up to the twofold degeneracy, u {sub 0} < 0 and u {sub 0} > 0, solutionsmore » caused by the well-known “ecliptic” degeneracy. It is found that the binary lens is composed of two M dwarf stars with similar masses, M {sub 1} = 0.38 ± 0.04 M {sub ⊙} (0.50 ± 0.05 M {sub ⊙}) and M {sub 2} = 0.38 ± 0.04 M {sub ⊙} (0.55 ± 0.06 M {sub ⊙}), and the distance to the lens is D {sub L} = 2.77 ± 0.23 kpc (3.30 ± 0.29 kpc). Here the physical parameters outside and inside the parentheses are for the u {sub 0} < 0 and u {sub 0} > 0 solutions, respectively.« less

Application of Plenoptic PIV for 3D Velocity Measurements Over Roughness Elements in a Refractive Index Matched Facility

NASA Astrophysics Data System (ADS)

Thurow, Brian; Johnson, Kyle; Kim, Taehoon; Blois, Gianluca; Best, Jim; Christensen, Ken

2014-11-01

The application of Plenoptic PIV in a Refractive Index Matched (RIM) facility housed at Illinois is presented. Plenoptic PIV is an emerging 3D diagnostic that exploits the light-field imaging capabilities of a plenoptic camera. Plenoptic cameras utilize a microlens array to measure the position and angle of light rays captured by the camera. 3D/3C velocity fields are determined through application of the MART algorithm for volume reconstruction and a conventional 3D cross-correlation PIV algorithm. The RIM facility is a recirculating tunnel with a 62.5% aqueous solution of sodium iodide used as the working fluid. Its resulting index of 1.49 is equal to that of acrylic. Plenoptic PIV was used to measure the 3D velocity field of a turbulent boundary layer flow over a smooth wall, a single wall-mounted hemisphere and a full array of hemispheres (i.e. a rough wall) with a k/ δ ~ 4.6. Preliminary time averaged and instantaneous 3D velocity fields will be presented. This material is based upon work supported by the National Science Foundation under Grant No. 1235726.

Patterning highly ordered arrays of complex nanofeatures through EUV directed polarity switching of non chemically amplified photoresist

PubMed Central

Ghosh, Subrata; Satyanarayana, V. S. V.; Pramanick, Bulti; Sharma, Satinder K.; Pradeep, Chullikkattil P.; Morales-Reyes, Israel; Batina, Nikola; Gonsalves, Kenneth E.

2016-01-01

Given the importance of complex nanofeatures in the filed of micro-/nanoelectronics particularly in the area of high-density magnetic recording, photonic crystals, information storage, micro-lens arrays, tissue engineering and catalysis, the present work demonstrates the development of new methodology for patterning complex nanofeatures using a recently developed non-chemically amplified photoresist (n-CARs) poly(4-(methacryloyloxy)phenyl)dimethylsulfoniumtriflate) (polyMAPDST) with the help of extreme ultraviolet lithography (EUVL) as patterning tool. The photosensitivity of polyMAPDST is mainly due to the presence of radiation sensitive trifluoromethanesulfonate unit (triflate group) which undergoes photodegradation upon exposure with EUV photons, and thus brings in polarity change in the polymer structure. Integration of such radiation sensitive unit into polymer network avoids the need of chemical amplification which is otherwise needed for polarity switching in the case of chemically amplified photoresists (CARs). Indeed, we successfully patterned highly ordered wide-raging dense nanofeatures that include nanodots, nanowaves, nanoboats, star-elbow etc. All these developed nanopatterns have been well characterized by FESEM and AFM techniques. Finally, the potential of polyMAPDST has been established by successful transfer of patterns into silicon substrate through adaptation of compatible etch recipes. PMID:26975782

Progress on complementary patterning using plasmon-excited electron beamlets (Conference Presentation)

NASA Astrophysics Data System (ADS)

Du, Zhidong; Chen, Chen; Pan, Liang

2017-04-01

Maskless lithography using parallel electron beamlets is a promising solution for next generation scalable maskless nanolithography. Researchers have focused on this goal but have been unable to find a robust technology to generate and control high-quality electron beamlets with satisfactory brightness and uniformity. In this work, we will aim to address this challenge by developing a revolutionary surface-plasmon-enhanced-photoemission (SPEP) technology to generate massively-parallel electron beamlets for maskless nanolithography. The new technology is built upon our recent breakthroughs in plasmonic lenses, which will be used to excite and focus surface plasmons to generate massively-parallel electron beamlets through photoemission. Specifically, the proposed SPEP device consists of an array of plasmonic lens and electrostatic micro-lens pairs, each pair independently producing an electron beamlet. During lithography, a spatial optical modulator will dynamically project light onto individual plasmonic lenses to control the switching and brightness of electron beamlets. The photons incident onto each plasmonic lens are concentrated into a diffraction-unlimited spot as localized surface plasmons to excite the local electrons to near their vacuum levels. Meanwhile, the electrostatic micro-lens extracts the excited electrons to form a focused beamlet, which can be rastered across a wafer to perform lithography. Studies showed that surface plasmons can enhance the photoemission by orders of magnitudes. This SPEP technology can scale up the maskless lithography process to write at wafers per hour. In this talk, we will report the mechanism of the strong electron-photon couplings and the locally enhanced photoexcitation, design of a SPEP device, overview of our proof-of-concept study, and demonstrated parallel lithography of 20-50 nm features.

Performance of Large Format Transition Edge Sensor Microcalorimeter Arrays

NASA Technical Reports Server (NTRS)

Chervenak, J. A.; Adams, J. A.; Bandler, S. B.; Busch, S. E.; Eckart, M. E.; Ewin, A. E.; Finkbeiner, F. M.; Kilbourne, C. A.; Kelley, R. L.; Porst, J. P.;

Large Format Transition Edge Sensor Microcalorimeter Arrays

NASA Technical Reports Server (NTRS)

Chervenak, J. A.; Adams, J. A.; Bandler, S. b.; Busch, S. E.; Eckart, M. E.; Ewin, A. E.; Finkbeiner, F. M.; Kilbourne, C. A.; Kelley, R. L.; Porst, J. P.;

Growth of high-aspect ratio horizontally-aligned ZnO nanowire arrays.

PubMed

Soman, Pranav; Darnell, Max; Feldman, Marc D; Chen, Shaochen

2011-08-01

A method of fabricating horizontally-aligned zinc-oxide (ZnO) nanowire (NW) arrays with full control over the width and length is demonstrated. SEM images reveal the hexagonal structure typical of zinc oxide NWs. Arrays of high-aspect ratio horizontal ZnO NWs are fabricated by making use of the lateral overgrowth from dot patterns created by electron beam lithography (EBL). An array of patterned wires are lifted off and transferred to a flexible PDMS substrate with possible applications in several key nanotechnology areas.

Fully Tunable Silicon Nanowire Arrays Fabricated by Soft Nanoparticle Templating.

PubMed

Rey, By Marcel; Elnathan, Roey; Ditcovski, Ran; Geisel, Karen; Zanini, Michele; Fernandez-Rodriguez, Miguel-Angel; Naik, Vikrant V; Frutiger, Andreas; Richtering, Walter; Ellenbogen, Tal; Voelcker, Nicolas H; Isa, Lucio

2016-01-13

We demonstrate a fabrication breakthrough to produce large-area arrays of vertically aligned silicon nanowires (VA-SiNWs) with full tunability of the geometry of the single nanowires and of the whole array, paving the way toward advanced programmable designs of nanowire platforms. At the core of our fabrication route, termed "Soft Nanoparticle Templating", is the conversion of gradually compressed self-assembled monolayers of soft nanoparticles (microgels) at a water-oil interface into customized lithographical masks to create VA-SiNW arrays by means of metal-assisted chemical etching (MACE). This combination of bottom-up and top-down techniques affords excellent control of nanowire etching site locations, enabling independent control of nanowire spacing, diameter and height in a single fabrication route. We demonstrate the fabrication of centimeter-scale two-dimensional gradient photonic crystals exhibiting continuously varying structural colors across the entire visible spectrum on a single silicon substrate, and the formation of tunable optical cavities supported by the VA-SiNWs, as unambiguously demonstrated through numerical simulations. Finally, Soft Nanoparticle Templating is combined with optical lithography to create hierarchical and programmable VA-SiNW patterns.

New fabrication of high-frequency (100-MHz) ultrasound PZT film kerfless linear array.

PubMed

Zhu, Benpeng; Chan, Ngai Yui; Dai, Jiyan; Shung, K Kirk; Takeuchi, Shinichi; Zhou, Qifa

2013-04-01

The paper describes the design, fabrication, and measurements of a high-frequency ultrasound kerfless linear array prepared from hydrothermal lead zirconate titanate (PZT) thick film. The 15-μm hydrothermal PZT thick film with an area of 1 × 1 cm, obtained through a self-separation process from Ti substrate, was used to fabricate a 32-element 100-MHz kerfless linear array with photolithography. The bandwidth at -6 dB without matching layer, insertion loss around center frequency, and crosstalk between adjacent elements were measured to be 39%, -30 dB, and -15 dB, respectively.

Structure and properties of nanostructured ZnO arrays and ZnO/Ag nanocomposites fabricated by pulsed electrodeposition

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kopach, V. R.; Klepikova, K. S.; Klochko, N. P., E-mail: klochko-np@mail.ru

We investigate the structure, surface morphology, and optical properties of nanostructured ZnO arrays fabricated by pulsed electrodeposition, Ag nanoparticles precipitated from colloidal solutions, and a ZnO/Ag nanocomposite based on them. The electronic and electrical parameters of the ZnO arrays and ZnO/Ag nanocomposites are analyzed by studying the I–V and C–V characteristics. Optimal modes for fabricating the ZnO/Ag heterostructures with the high stability and sensitivity to ultraviolet radiation as promising materials for use in photodetectors, gas sensors, and photocatalysts are determined.

Continuous fabrication of nanostructure arrays for flexible surface enhanced Raman scattering substrate

PubMed Central

Zhang, Chengpeng; Yi, Peiyun; Peng, Linfa; Lai, Xinmin; Chen, Jie; Huang, Meizhen; Ni, Jun

2017-01-01

Surface-enhanced Raman spectroscopy (SERS) has been a powerful tool for applications including single molecule detection, analytical chemistry, electrochemistry, medical diagnostics and bio-sensing. Especially, flexible SERS substrates are highly desirable for daily-life applications, such as real-time and in situ Raman detection of chemical and biological targets, which can be used onto irregular surfaces. However, it is still a major challenge to fabricate the flexible SERS substrate on large-area substrates using a facile and cost-effective technique. The roll-to-roll ultraviolet nanoimprint lithography (R2R UV-NIL) technique provides a solution for the continuous fabrication of flexible SERS substrate due to its high-speed, large-area, high-resolution and high-throughput. In this paper, we presented a facile and cost-effective method to fabricate flexible SERS substrate including the fabrication of polymer nanostructure arrays and the metallization of the polymer nanostructure arrays. The polymer nanostructure arrays were obtained by using R2R UV-NIL technique and anodic aluminum oxide (AAO) mold. The functional SERS substrates were then obtained with Au sputtering on the surface of the polymer nanostructure arrays. The obtained SERS substrates exhibit excellent SERS and flexibility performance. This research can provide a beneficial direction for the continuous production of the flexible SERS substrates. PMID:28051175

Fabrication of cell container arrays with overlaid surface topographies.

PubMed

Truckenmüller, Roman; Giselbrecht, Stefan; Escalante-Marun, Maryana; Groenendijk, Max; Papenburg, Bernke; Rivron, Nicolas; Unadkat, Hemant; Saile, Volker; Subramaniam, Vinod; van den Berg, Albert; van Blitterswijk, Clemens; Wessling, Matthias; de Boer, Jan; Stamatialis, Dimitrios

2012-02-01

This paper presents cell culture substrates in the form of microcontainer arrays with overlaid surface topographies, and a technology for their fabrication. The new fabrication technology is based on microscale thermoforming of thin polymer films whose surfaces are topographically prepatterned on a micro- or nanoscale. For microthermoforming, we apply a new process on the basis of temporary back moulding of polymer films and use the novel concept of a perforated-sheet-like mould. Thermal micro- or nanoimprinting is applied for prepatterning. The novel cell container arrays are fabricated from polylactic acid (PLA) films. The thin-walled microcontainer structures have the shape of a spherical calotte merging into a hexagonal shape at their upper circumferential edges. In the arrays, the cell containers are arranged densely packed in honeycomb fashion. The inner surfaces of the highly curved container walls are provided with various topographical micro- and nanopatterns. For a first validation of the microcontainer arrays as in vitro cell culture substrates, C2C12 mouse premyoblasts are cultured in containers with microgrooved surfaces and shown to align along the grooves in the three-dimensional film substrates. In future stem-cell-biological and tissue engineering applications, microcontainers fabricated using the proposed technology may act as geometrically defined artificial microenvironments or niches.

Innovative Magnetic-Field Array Probe for TRUST Integrated Circuits

DTIC Science & Technology

2017-03-01

real-time an IC device. This non-invasive solution is cost effective, with a small form factor. Keywords: Electromagnetic radiation; Near-Field...solicitation was to design, develop and fabricate a low cost electromagnetic probe array for ICs counterfeit. The probe array should operate in the near...Our overall effort was focus on modeling, designing, fabricating, and utilizing novel electromagnetic probes for the analysis, characterization

Design and grayscale fabrication of beamfanners in a silicon substrate

NASA Astrophysics Data System (ADS)

Ellis, Arthur Cecil

2001-11-01

This dissertation addresses important first steps in the development of a grayscale fabrication process for multiple phase diffractive optical elements (DOS's) in silicon. Specifically, this process was developed through the design, fabrication, and testing of 1-2 and 1-4 beamfanner arrays for 5-micron illumination. The 1-2 beamfanner arrays serve as a test-of- concept and basic developmental step toward the construction of the 1-4 beamfanners. The beamfanners are 50 microns wide, and have features with dimensions of between 2 and 10 microns. The Iterative Annular Spectrum Approach (IASA) method, developed by Steve Mellin of UAH, and the Boundary Element Method (BEM) are the design and testing tools used to create the beamfanner profiles and predict their performance. Fabrication of the beamfanners required the techniques of grayscale photolithography and reactive ion etching (RIE). A 2-3micron feature size 1-4 silicon beamfanner array was fabricated, but the small features and contact photolithographic techniques available prevented its construction to specifications. A second and more successful attempt was made in which both 1-4 and 1-2 beamfanner arrays were fabricated with a 5-micron minimum feature size. Photolithography for the UAH array was contracted to MEMS-Optical of Huntsville, Alabama. A repeatability study was performed, using statistical techniques, of 14 photoresist arrays and the subsequent RIE process used to etch the arrays in silicon. The variance in selectivity between the 14 processes was far greater than the variance between the individual etched features within each process. Specifically, the ratio of the variance of the selectivities averaged over each of the 14 etch processes to the variance of individual feature selectivities within the processes yielded a significance level below 0.1% by F-test, indicating that good etch-to-etch process repeatability was not attained. One of the 14 arrays had feature etch-depths close enough to design specifications for optical testing, but 5- micron IR illumination of the 1-4 and 1-2 beamfanners yielded no convincing results of beam splitting in the detector plane 340 microns from the surface of the beamfanner array.

Self-addressed diffractive lens schemes for the characterization of LCoS displays

NASA Astrophysics Data System (ADS)

Zhang, Haolin; Lizana, Angel; Iemmi, Claudio; Monroy-Ramírez, Freddy A.; Marquez, Andrés.; Moreno, Ignacio; Campos, Juan

2018-02-01

We proposed a self-calibration method to calibrate both the phase-voltage look-up table and the screen phase distribution of Liquid Crystal on Silicon (LCoS) displays by implementing different lens configurations on the studied device within a same optical scheme. On the one hand, the phase-voltage relation is determined from interferometric measurements, which are obtained by addressing split-lens phase distributions on the LCoS display. On the other hand, the surface profile is retrieved by self-addressing a diffractive micro-lens array to the LCoS display, in a way that we configure a Shack-Hartmann wavefront sensor that self-determines the screen spatial variations. Moreover, both the phase-voltage response and the surface phase inhomogeneity of the LCoS are measured within the same experimental set-up, without the necessity of further adjustments. Experimental results prove the usefulness of the above-mentioned technique for LCoS displays characterization.

A polarization-independent liquid crystal phase modulation using polymer-network liquid crystal with orthogonal alignment layers

NASA Astrophysics Data System (ADS)

Chen, Ming-Syuan; Lin, Wei-Chih; Tsou, Yu-Shih; Lin, Yi-Hsin

2012-10-01

A polarization-independent liquid crystal (LC) phase modulation using polymer-network liquid crystals with orthogonal alignments layers (T-PNLC) is demonstrated. T-PNLC consists of three layers. LC directors in the two layers near glass substrates are orthogonal to each other. In the middle layer, LC directors are perpendicular to the glass substrate. The advantages of such T-PNLC include polarizer-free, larger phase shift (~0.4π rad) than the residual phase type (<0.05π rad), and low operating voltage (< 30Vrms). It does not require bias voltage for avoiding scattering because the refractive index of liquid crystals matches that of polymers. The phase shift of T-PNLC is affected by the cell gap and the curing voltages. The potential applications are laser beam steering, spatial light modulators and electrically tunable micro-lens arrays.

Adaptive DOF for plenoptic cameras

NASA Astrophysics Data System (ADS)

Oberdörster, Alexander; Lensch, Hendrik P. A.

2013-03-01

Plenoptic cameras promise to provide arbitrary re-focusing through a scene after the capture. In practice, however, the refocusing range is limited by the depth of field (DOF) of the plenoptic camera. For the focused plenoptic camera, this range is given by the range of object distances for which the microimages are in focus. We propose a technique of recording light fields with an adaptive depth of focus. Between multiple exposures { or multiple recordings of the light field { the distance between the microlens array (MLA) and the image sensor is adjusted. The depth and quality of focus is chosen by changing the number of exposures and the spacing of the MLA movements. In contrast to traditional cameras, extending the DOF does not necessarily lead to an all-in-focus image. Instead, the refocus range is extended. There is full creative control about the focus depth; images with shallow or selective focus can be generated.

Lithography-free fabrication of silicon nanowire and nanohole arrays by metal-assisted chemical etching

PubMed Central

2013-01-01

We demonstrated a novel, simple, and low-cost method to fabricate silicon nanowire (SiNW) arrays and silicon nanohole (SiNH) arrays based on thin silver (Ag) film dewetting process combined with metal-assisted chemical etching. Ag mesh with holes and semispherical Ag nanoparticles can be prepared by simple thermal annealing of Ag thin film on a silicon substrate. Both the diameter and the distribution of mesh holes as well as the nanoparticles can be manipulated by the film thickness and the annealing temperature. The silicon underneath Ag coverage was etched off with the catalysis of metal in an aqueous solution containing HF and an oxidant, which form silicon nanostructures (either SiNW or SiNH arrays). The morphologies of the corresponding etched SiNW and SiNH arrays matched well with that of Ag holes and nanoparticles. This novel method allows lithography-free fabrication of the SiNW and SiNH arrays with control of the size and distribution. PMID:23557325

Hydrophilicity Reinforced Adhesion of Anodic Alumina Oxide Template Films to Conducting Substrates for Facile Fabrication of Highly Ordered Nanorod Arrays.

PubMed

Wang, Chuanju; Wang, Guiqiang; Yang, Rui; Sun, Xiangyu; Ma, Hui; Sun, Shuqing

2017-01-17

Arrays of ordered nanorods are of special interest in many fields. However, it remains challenging to obtain such arrays on conducting substrates in a facile manner. In this article, we report the fabrication of highly ordered and vertically standing nanorod arrays of both metals and semiconductors on Au films and indium tin oxide glass substrates without an additional layering. In this approach, following the simple hydrophilic treatment of an anodic aluminum oxide (AAO) membrane and conducting substrates, the AAO membrane was transferred onto the modified substrates with excellent adhesion. Subsequently, nanorod arrays of various materials were electrodeposited on the conducting substrates directly. This method avoids any expensive and tedious lithographic and ion milling process, which provides a simple yet robust route to the fabrication of arrays of 1D materials with high aspect ratio on conducting substrates, which shall pave the way for many practical applications in a range of fields.

Very high frequency (beyond 100 MHz) PZT kerfless linear arrays.

PubMed

Wu, Da-Wei; Zhou, Qifa; Geng, Xuecang; Liu, Chang-Geng; Djuth, Frank; Shung, K Kirk

2009-10-01

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss).

Very High Frequency (Beyond 100 MHz) PZT Kerfless Linear Arrays

PubMed Central

Wu, Da-Wei; Zhou, Qifa; Geng, Xuecang; Liu, Chang-Geng; Djuth, Frank; Shung, K. Kirk

2010-01-01

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-µm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-µm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss). PMID:19942516

Electrothermal actuators fabricated in four-level planarized surface-miromachined polycrystalline silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Comtois, J.H.; Michalicek, A.; Barron, C.C.

1997-11-01

This paper presents the results of tests performed on a variety of electrochemical microactuators and arrays of these actuators fabricated in the SUMMiT process at the U.S. Department of Energy`s Sandia National Laboratories. These results are intended to aid designers of thermally actuated mechanisms, and they apply to similar actuators made in other polysilicon MEMS processes such as the MUMPS process. Measurements include force and deflection versus input power, maximum operating frequency, effects of long term operation, and ideal actuator and array geometries for different applications` force requirements. Also, different methods of arraying these actuators together are compared. It ismore » found that a method using rotary joints, enabled by the advanced features of the SUMMiT fabrication process, is the most efficient array design. The design and operation of a thermally actuated stepper motor is explained to illustrate a useful application of these arrays.« less

Fabrication of hexagonal star-shaped and ring-shaped patterns arrays by Mie resonance sphere-lens-lithography

NASA Astrophysics Data System (ADS)

Liu, Xianchao; Wang, Jun; Li, Ling; Gou, Jun; Zheng, Jie; Huang, Zehua; Pan, Rui

2018-05-01

Mie resonance sphere-lens-lithography has proved to be a good candidate for fabrication of large-area tunable surface nanopattern arrays. Different patterns on photoresist surface are obtained theoretically by adjusting optical coupling among neighboring spheres with different gap sizes. The effect of light reflection from the substrate on the pattern produced on the photoresist with a thin thickness is also discussed. Sub-micron hexagonal star-shaped and ring-shaped patterns arrays are achieved with close-packed spheres arrays and spheres arrays with big gaps, respectively. Changing of star-shaped vertices is induced by different polarization of illumination. Experimental results agree well with the simulation. By using smaller resonance spheres, sub-400 nm star-shaped and ring-shaped patterns can be realized. These tunable patterns are different from results of previous reports and have enriched pattern morphology fabricated by sphere-lens-lithography, which can find application in biosensor and optic devices.

Large-Area Subwavelength Aperture Arrays Fabricated Using Nanoimprint Lithography

DOE PAGES

Skinner, J. L.; Hunter, L. L.; Talin, A. A.; ...

2008-07-29

In this paper, we report on the fabrication and characterization of large-area 2-D square arrays of subwavelength holes in Ag and Al films. Fabrication is based on thermal nanoimprint lithography and metal evaporation, without the need for etching, and is compatible with low-cost, large-scale production. Reflectance spectra for these arrays display an intensity minimum whose amplitude, center wavelength, and line width depend on the geometry of the array and the reflectivity of the metal film. By placing various fluids in contact with the subwavelength aperture arrays, we observe that the center wavelength of the reflectance minimum varies linearly with themore » refractive index of the fluid with a sensitivity of over 500 nm per refractive index unit. Lastly, the surface plasmon theory is used to predict sensitivities to refractive index change with accuracies better than 0.5%.« less

Trapping and Collection of Lymphocytes Using Microspot Array Chip and Magnetic Beads

NASA Astrophysics Data System (ADS)

Hashioka, Shingi; Obata, Tsutomu; Tokimitsu, Yoshiharu; Fujiki, Satoshi; Nakazato, Hiroyoshi; Muraguchi, Atsushi; Kishi, Hiroyuki; Tanino, Katsumi

2006-04-01

A microspot array chip, which has microspots of a magnetic thin film patterned on a glass substrate, was fabricated for trapping individual cells and for measuring their cellular response. The chip was easily fabricated by conventional semiconductor fabrication techniques on a mass production level as a disposable medical device. When a solution of lymphocyte-bound-magnetic beads was poured into the magnetized chip, each lymphocyte was trapped on each microspot of the magnetic thin film. The trapped cells were easily recovered from the chip using a micromanipulator. The micro-spot array chip can be utilized for arraying live cells and for measuring the response of each cell. The chip will be useful for preparing on array of different kinds of cells and for analyzing cellular response at the single cell level. The chip will be particularly useful for detecting antigen-specific B-lymphocytes and antigen-specific antibody complementary deoxyribonucleic acid (cDNA).

Simple and cost-effective fabrication of microvalve arrays in PDMS using laser cut molds with application to C. elegans manipulation in microfluidics

NASA Astrophysics Data System (ADS)

Samuel, R.; Thacker, C. M.; Maricq, A. V.; Gale, B. K.

2014-09-01

We present a new fabrication protocol for fabricating pneumatically controlled microvalve arrays (consisting of 100 s of microvalves) in PDMS substrates. The protocol utilizes rapid and cost-effective fabrication of molds using laser cutting of adhesive vinyl tapes and replica molding of PDMS. Hence the protocol is fast, simple and avoids cleanroom use. The results show that effective doormat-style microvalves can be easily fabricated in arrays by manipulating the stiffness of the actuating membrane through varying the valve-chamber area/shape. Three frequently used valve-chamber shapes (circle, square and capsule) were tested and all showed advantages in different situations. Circular valve chambers were best for small valves, square valves were best for medium-sized valves, and the capsule valves were best for larger valves. An application of this protocol has been demonstrated in the fabrication of a microfluidic 32-well plate for high-throughput manipulation of C. elegans for biomedical research.

Fabrication of close-packed TES microcalorimeter arrays using superconducting molybdenum/gold transition-edge sensors

NASA Astrophysics Data System (ADS)

Finkbeiner, F. M.; Brekosky, R. P.; Chervenak, J. A.; Figueroa-Feliciano, E.; Li, M. J.; Lindeman, M. A.; Stahle, C. K.; Stahle, C. M.; Tralshawala, N.

2002-02-01

We present an overview of our efforts in fabricating Transition-Edge Sensor (TES) microcalorimeter arrays for use in astronomical x-ray spectroscopy. Two distinct types of array schemes are currently pursued: 5×5 single pixel TES array where each pixel is a TES microcalorimeter, and Position-Sensing TES (PoST) array. In the latter, a row of 7 or 15 thermally-linked absorber pixels is read out by two TES at its ends. Both schemes employ superconducting Mo/Au bilayers as the TES. The TES are placed on silicon nitride membranes for thermal isolation from the structural frame. The silicon nitride membranes are prepared by a Deep Reactive Ion Etch (DRIE) process into a silicon wafer. In order to achieve the concept of closely packed arrays without decreasing its structural and functional integrity, we have already developed the technology to fabricate arrays of cantilevered pixel-sized absorbers and slit membranes in silicon nitride films. Furthermore, we have started to investigate ultra-low resistance through-wafer micro-vias to bring the electrical contact out to the back of a wafer. .

Fabricating interlocking support walls, with an adjustable backshort, in a TES bolometer array for far-infrared astronomy

NASA Astrophysics Data System (ADS)

Miller, Timothy M.; Abrahams, John H.; Allen, Christine A.

2006-04-01

We report a fabrication process for deep etching silicon to different depths with a single masking layer, using standard masking and exposure techniques. Using this technique, we have incorporated a deep notch in the support walls of a transition-edge-sensor (TES) bolometer array during the detector back-etch, while simultaneously creating a cavity behind the detector. The notches serve to receive the support beams of a separate component, the Backshort-Under-Grid (BUG), an array of adjustable height quarter-wave backshorts that fill the cavities behind each pixel in the detector array. The backshort spacing, set prior to securing to the detector array, can be controlled from 25 to 300 μm by adjusting only a few process steps. In addition to backshort spacing, the interlocking beams and notches provide positioning and structural support for the ˜1 mm pitch, 8×8 array. This process is being incorporated into developing a TES bolometer array with an adjustable backshort for use in far-infrared astronomy. The masking technique and machining process used to fabricate the interlocking walls will be discussed.

Square and Rectangular Arrays from Directed Assembly of Sphere-forming Diblock Copolymers in Thin Films

NASA Astrophysics Data System (ADS)

Ji, Shengxiang; Nagpal, Umang; Liao, Wen; de Pablo, Juan; Nealey, Paul

2010-03-01

Patterns of square and rectangular arrays with nanoscale dimensions are scientifically and technologically important. Fabrication of square array patterns in thin films has been demonstrated by directed assembly of cylinder-forming diblock copolymers on chemically patterned substrates, supramolecular assembly of diblock copolymers, and self-assembly of triblock terpolymers. However, a macroscopic area of square array patterns with long-range order has not been achieved, and the fabrication of rectangular arrays has not been reported so far. Here we report a facile approach for fabricating patterns of square and rectangular arrays by directing the assembly of sphere-forming diblock copolymers on chemically patterned substrates. On stripe patterns, a square arrangement of half spheres, corresponding to the (100) plane of the body-centred cubic (BCC) lattice, formed on film surfaces. When the underlying pattern periods mismatched with the copolymer period, the square pattern could be stretched (up to ˜60%) or compressed (˜15%) to form rectangular arrays. Monte Carlo simulations have been further used to verify the experimental results and the 3-dimensional arrangements of spheres.

Fabrication and characterization of multi-stopband Fabry-Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology

NASA Astrophysics Data System (ADS)

Shen, Yannan; Istock, André; Zaman, Anik; Woidt, Carsten; Hillmer, Hartmut

2018-05-01

Miniaturization of optical spectrometers can be achieved by Fabry-Pérot (FP) filter arrays. Each FP filter consists of two parallel highly reflecting mirrors and a resonance cavity in between. Originating from different individual cavity heights, each filter transmits a narrow spectral band (transmission line) with different wavelengths. Considering the fabrication efficiency, plasma enhanced chemical vapor deposition (PECVD) technology is applied to implement the high-optical-quality distributed Bragg reflectors (DBRs), while substrate conformal imprint lithography (one type of nanoimprint technology) is utilized to achieve the multiple cavities in just a single step. The FP filter array fabricated by nanoimprint combined with corresponding detector array builds a so-called "nanospectrometer". However, the silicon nitride and silicon dioxide stacks deposited by PECVD result in a limited stopband width of DBR (i.e., < 100 nm), which then limits the sensing range of filter arrays. However, an extension of the spectral range of filter arrays is desired and the topic of this investigation. In this work, multiple DBRs with different central wavelengths (λ c) are structured, deposited, and combined on a single substrate to enlarge the entire stopband. Cavity arrays are successfully aligned and imprinted over such terrace like surface in a single step. With this method, small chip size of filter arrays can be preserved, and the fabrication procedure of multiple resonance cavities is kept efficient as well. The detecting range of filter arrays is increased from roughly 50 nm with single DBR to 163 nm with three different DBRs.

Materials Development for Auxiliary Components for Large Compact Mo/Au TES Arrays

NASA Technical Reports Server (NTRS)

Finkbeiner, F. m.; Chervenak, J. A.; Bandler, S. R.; Brekosky, R.; Brown, A. D.; Figueroa-Feliciano, E.; Iyomoto, N.; Kelley, R. L.; Kilbourne, C. A.; Porter, F. S.;

Optimized micromirror arrays for adaptive optics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Michalicek, M. Adrian

This paper describes the design, layout, fabrication, and surface characterization of highly optimized surface micromachined micromirror devices. Design considerations and fabrication capabilities are presented. These devices are fabricated in the state-of-the-art, four-level, planarized, ultra-low-stress polysilicon process available at Sandia National Laboratories known as the Sandia Ultra-planar Multi-level MEMS Technology (SUMMiT). This enabling process permits the development of micromirror devices with near-ideal characteristics that have previously been unrealizable in standard three-layer polysilicon processes. The reduced 1 {mu}m minimum feature sizes and 0.1 {mu}m mask resolution make it possible to produce dense wiring patterns and irregularly shaped flexures. Likewise, mirror surfaces canmore » be uniquely distributed and segmented in advanced patterns and often irregular shapes in order to minimize wavefront error across the pupil. The ultra-low-stress polysilicon and planarized upper layer allow designers to make larger and more complex micromirrors of varying shape and surface area within an array while maintaining uniform performance of optical surfaces. Powerful layout functions of the AutoCAD editor simplify the design of advanced micromirror arrays and make it possible to optimize devices according to the capabilities of the fabrication process. Micromirrors fabricated in this process have demonstrated a surface variance across the array from only 2{endash}3 nm to a worst case of roughly 25 nm while boasting active surface areas of 98{percent} or better. Combining the process planarization with a {open_quotes}planarized-by-design{close_quotes} approach will produce micromirror array surfaces that are limited in flatness only by the surface deposition roughness of the structural material. Ultimately, the combination of advanced process and layout capabilities have permitted the fabrication of highly optimized micromirror arrays for adaptive optics. {copyright} {ital 1999 American Institute of Physics.}« less

Multi-layered fabrication of large area PDMS flexible optical light guide sheets

NASA Astrophysics Data System (ADS)

Green, Robert; Knopf, George K.; Bordatchev, Evgueni V.

2017-02-01

Large area polydimethylsiloxane (PDMS) flexible optical light guide sheets can be used to create a variety of passive light harvesting and illumination systems for wearable technology, advanced indoor lighting, non-planar solar light collectors, customized signature lighting, and enhanced safety illumination for motorized vehicles. These thin optically transparent micro-patterned polymer sheets can be draped over a flat or arbitrarily curved surface. The light guiding behavior of the optical light guides depends on the geometry and spatial distribution of micro-optical structures, thickness and shape of the flexible sheet, refractive indices of the constituent layers, and the wavelength of the incident light. A scalable fabrication method that combines soft-lithography, closed thin cavity molding, partial curing, and centrifugal casting is described in this paper for building thin large area multi-layered PDMS optical light guide sheets. The proposed fabrication methodology enables the of internal micro-optical structures (MOSs) in the monolithic PDMS light guide by building the optical system layer-by-layer. Each PDMS layer in the optical light guide can have the similar, or a slightly different, indices of refraction that permit total internal reflection within the optical sheet. The individual molded layers may also be defect free or micro-patterned with microlens or reflecting micro-features. In addition, the bond between adjacent layers is ensured because each layer is only partially cured before the next functional layer is added. To illustrate the scalable build-by-layers fabrication method a three-layer mechanically flexible illuminator with an embedded LED strip is constructed and demonstrated.

Fabrication of polymer microlenses on single mode optical fibers for light coupling

NASA Astrophysics Data System (ADS)

Zaboub, Monsef; Guessoum, Assia; Demagh, Nacer-Eddine; Guermat, Abdelhak

2016-05-01

In this paper, we present a technique for producing fibers optics micro-collimators composed of polydimethylsiloxane PDMS microlenses of different radii of curvature. The waist and working distance values obtained enable the optimization of optical coupling between optical fibers, fibers and optical sources, and fibers and detectors. The principal is based on the injection of polydimethylsiloxane (PDMS) into a conical micro-cavity chemically etched at the end of optical fibers. A spherical microlens is then formed that is self-centered with respect to the axis of the fiber. Typically, an optimal radius of curvature of 10.08 μm is obtained. This optimized micro-collimator is characterized by a working distance of 19.27 μm and a waist equal to 2.28 μm for an SMF 9/125 μm fiber. The simulation and experimental results reveal an optical coupling efficiency that can reach a value of 99.75%.

Fabrication and testing of polyimide-based microelectrode arrays for cortical mapping of evoked potentials.

PubMed

Myllymaa, Sami; Myllymaa, Katja; Korhonen, Hannu; Töyräs, Juha; Jääskeläinen, Juha E; Djupsund, Kaj; Tanila, Heikki; Lappalainen, Reijo

2009-06-15

Modern microfabrication techniques make it possible to develop microelectrode arrays that may be utilized not only in neurophysiological research but also in the clinic, e.g. in neurosurgery and as elements of neural prostheses. The aim of this study was to test whether a flexible microelectrode array is suitable for recording cortical surface field potentials in rats. Polyimide-based microelectrode arrays were fabricated by utilizing microfabrication techniques e.g. photolithography and magnetron sputter deposition. The present microelectrode array consists of eight platinum microelectrodes (round-shaped, Ø: 200 microm), transmission lines and connector pads sandwiched between two thin layers of biocompatible polyimide. The microelectrode arrays were electrochemically characterized by impedance spectroscopy in physiological saline solution and successfully tested in vivo by conducting acute and chronic measurements of evoked potentials on the surface of rat cortex. The arrays proved excellent flexibility and mechanical strength during handling and implantation onto the surface of cortex. The excellent electrochemical characteristics and stable in vivo recordings with high spatiotemporal resolution highlight the potential of these arrays. The fabrication protocol described here allows implementation of several other neural interfaces with different layouts, material selections or target areas either for recording or stimulation purposes.

Microfabricated Multianalyte Sensor Arrays for Metabolic Monitoring

DTIC Science & Technology

2006-09-01

aqueous in vivo-like surrounding15-18 to entrap both the redox polymer and glucose oxidase on polyimide sheets. We have used biocompatible PEG-DA hydrogel...arrays were fabricated on gold electrodes on flexible polyimide sheets by cross-linking glucose oxidase and redox polymer using UV-initiated free...cyclic voltammetry. We have fabricated an array of glucose sensors on flexible polyimide sheets that exhibit the desired linear response in the

Direct Fabrication of a-Si:H Thin Film Transistor Arrays on Plastic and Metal Foils for Flexible Displays

DTIC Science & Technology

2008-12-01

TFTs ) arrays for high information content active matrix flexible displays for Army applications. For all flexible substrates a manufacturable...impermeable flexible substrate systems “display-ready” materials and handling protocols, (ii) high performance TFT devices and circuits fabricated...processes for integration with the flexible TFT arrays. Approaches and solution to address each of these major challenges are described in the

The design and fabrication of microstrip omnidirectional array antennas for aerospace applications

NASA Technical Reports Server (NTRS)

Campbell, T. G.; Appleton, M. W.; Lusby, T. K.

1976-01-01

A microstrip antenna design concept was developed that will provide quasi-omnidirectional radiation pattern characteristics about cylindrical and conical aerospace structures. L-band and S-band antenna arrays were designed, fabricated, and, in some cases, flight tested for rocket, satellite, and aircraft drone applications. Each type of array design is discussed along with a thermal cover design that was required for the sounding rocket applications.

Integrated RGB laser light module for autostereoscopic outdoor displays

NASA Astrophysics Data System (ADS)

Reitterer, Jörg; Fidler, Franz; Hambeck, Christian; Saint Julien-Wallsee, Ferdinand; Najda, Stephen; Perlin, Piotr; Stanczyk, Szymon; Czernecki, Robert; McDougall, Stewart D.; Meredith, Wyn; Vickers, Garrie; Landles, Kennedy; Schmid, Ulrich

2015-02-01

We have developed highly compact RGB laser light modules to be used as light sources in multi-view autostereoscopic outdoor displays and projection devices. Each light module consists of an AlGaInP red laser diode, a GaInN blue laser diode, a GaInN green laser diode, as well as a common cylindrical microlens. The plano-convex microlens is a so-called "fast axis collimator", which is widely used for collimating light beams emitted from high-power laser diode bars, and has been optimized for polychromatic RGB laser diodes. The three light beams emitted from the red, green, and blue laser diodes are collimated in only one transverse direction, the so-called "fast axis", and in the orthogonal direction, the so-called "slow axis", the beams pass the microlens uncollimated. In the far field of the integrated RGB light module this produces Gaussian beams with a large ellipticity which are required, e.g., for the application in autostereoscopic outdoor displays. For this application only very low optical output powers of a few milliwatts per laser diode are required and therefore we have developed tailored low-power laser diode chips with short cavity lengths of 250 μm for red and 300 μm for blue. Our RGB laser light module including the three laser diode chips, associated monitor photodiodes, the common microlens, as well as the hermetically sealed package has a total volume of only 0.45 cm³, which to our knowledge is the smallest RGB laser light source to date.

Fabrication of plasmonic cavity arrays for SERS analysis

NASA Astrophysics Data System (ADS)

Li, Ning; Feng, Lei; Teng, Fei; Lu, Nan

2017-05-01

The plasmonic cavity arrays are ideal substrates for surface enhanced Raman scattering analysis because they can provide hot spots with large volume for analyte molecules. The large area increases the probability to make more analyte molecules on hot spots and leads to a high reproducibility. Therefore, to develop a simple method for creating cavity arrays is important. Herein, we demonstrate how to fabricate a V and W shape cavity arrays by a simple method based on self-assembly. Briefly, the V and W shape cavity arrays are respectively fabricated by taking KOH etching on a nanohole and a nanoring array patterned silicon (Si) slides. The nanohole array is generated by taking a reactive ion etching on a Si slide assembled with monolayer of polystyrene (PS) spheres. The nanoring array is generated by taking a reactive ion etching on a Si slide covered with a monolayer of octadecyltrichlorosilane before self-assembling PS spheres. Both plasmonic V and W cavity arrays can provide large hot area, which increases the probability for analyte molecules to deposit on the hot spots. Taking 4-Mercaptopyridine as analyte probe, the enhancement factor can reach 2.99 × 105 and 9.97 × 105 for plasmonic V cavity and W cavity array, respectively. The relative standard deviations of the plasmonic V and W cavity arrays are 6.5% and 10.2% respectively according to the spectra collected on 20 random spots.

Fabrication of plasmonic cavity arrays for SERS analysis.

PubMed

Li, Ning; Feng, Lei; Teng, Fei; Lu, Nan

2017-05-05

The plasmonic cavity arrays are ideal substrates for surface enhanced Raman scattering analysis because they can provide hot spots with large volume for analyte molecules. The large area increases the probability to make more analyte molecules on hot spots and leads to a high reproducibility. Therefore, to develop a simple method for creating cavity arrays is important. Herein, we demonstrate how to fabricate a V and W shape cavity arrays by a simple method based on self-assembly. Briefly, the V and W shape cavity arrays are respectively fabricated by taking KOH etching on a nanohole and a nanoring array patterned silicon (Si) slides. The nanohole array is generated by taking a reactive ion etching on a Si slide assembled with monolayer of polystyrene (PS) spheres. The nanoring array is generated by taking a reactive ion etching on a Si slide covered with a monolayer of octadecyltrichlorosilane before self-assembling PS spheres. Both plasmonic V and W cavity arrays can provide large hot area, which increases the probability for analyte molecules to deposit on the hot spots. Taking 4-Mercaptopyridine as analyte probe, the enhancement factor can reach 2.99 × 10 5 and 9.97 × 10 5 for plasmonic V cavity and W cavity array, respectively. The relative standard deviations of the plasmonic V and W cavity arrays are 6.5% and 10.2% respectively according to the spectra collected on 20 random spots.

Infrared-Bolometer Arrays with Reflective Backshorts

NASA Technical Reports Server (NTRS)

Miller, Timothy M.; Abrahams, John; Allen, Christine A.

2011-01-01

Integrated circuits that incorporate square arrays of superconducting-transition- edge bolometers with optically reflective backshorts are being developed for use in image sensors in the spectral range from far infrared to millimeter wavelengths. To maximize the optical efficiency (and, thus, sensitivity) of such a sensor at a specific wavelength, resonant optical structures are created by placing the backshorts at a quarter wavelength behind the bolometer plane. The bolometer and backshort arrays are fabricated separately, then integrated to form a single unit denoted a backshort-under-grid (BUG) bolometer array. In a subsequent fabrication step, the BUG bolometer array is connected, by use of single-sided indium bump bonding, to a readout device that comprises mostly a superconducting quantum interference device (SQUID) multiplexer circuit. The resulting sensor unit comprising the BUG bolometer array and the readout device is operated at a temperature below 1 K. The concept of increasing optical efficiency by use of backshorts at a quarter wavelength behind the bolometers is not new. Instead, the novelty of the present development lies mainly in several features of the design of the BUG bolometer array and the fabrication sequence used to implement the design. Prior to joining with the backshort array, the bolometer array comprises, more specifically, a square grid of free-standing molybdenum/gold superconducting-transition-edge bolometer elements on a 1.4- m-thick top layer of silicon that is part of a silicon support frame made from a silicon-on-insulator wafer. The backshort array is fabricated separately as a frame structure that includes support beams and contains a correspond - ing grid of optically reflective patches on a single-crystal silicon substrate. The process used to fabricate the bolometer array includes standard patterning and etching steps that result in the formation of deep notches in the silicon support frame. These notches are designed to interlock with the support beams on the backshort-array structure to provide structural support and precise relative positioning. The backshort-array structure is inserted in the silicon support frame behind the bolometer array, and the notches in the frame serve to receive the support beams of the backshort-array structure and thus determine the distance between the backshort and bolometer planes. The depth of the notches and, thus, the distance between the backshort and bolometer planes, can be tailored to a value between 25 to 300 m adjusting only a few process steps. The backshort array is designed so as not to interfere with the placement of indium bumps for subsequent indium bump-bonding to the multiplexing readout circuitry

Three-Dimensional Waveguide Arrays for Coupling Between Fiber-Optic Connectors and Surface-Mounted Optoelectronic Devices

NASA Astrophysics Data System (ADS)

Hiramatsu, Seiki; Kinoshita, Masao

2005-09-01

This paper describes the fabrication of novel surface-mountable waveguide connectors and presents test results for them. To ensure more highly integrated and low-cost fabrication, we propose new three-dimensional (3-D) waveguide arrays that feature two-dimensionally integrated optical inputs/outputs and optical path redirection. A wafer-level stack and lamination process was used to fabricate the waveguide arrays. Vertical-cavity surface-emitting lasers (VCSELs) and photodiodes were directly mounted on the arrays and combined with mechanical transferable ferrule using active alignment. With the help of a flip-chip bonder, the waveguide connectors were mounted on a printed circuit board by solder bumps. Using mechanical transferable connectors, which can easily plug into the waveguide connectors, we obtained multi-gigabits-per-second transmission performance.

Fabrication and Testing of Binary-Phase Fourier Gratings for Nonuniform Array Generation

NASA Technical Reports Server (NTRS)

Keys, Andrew S.; Crow, Robert W.; Ashley, Paul R.; Nelson, Tom R., Jr.; Parker, Jack H.; Beecher, Elizabeth A.

2004-01-01

This effort describes the fabrication and testing of binary-phase Fourier gratings designed to generate an incoherent array of output source points with nonuniform user-defined intensities, symmetric about the zeroth order. Like Dammann fanout gratings, these binary-phase Fourier gratings employ only two phase levels to generate a defined output array. Unlike Dammann fanout gratings, these gratings generate an array of nonuniform, user-defined intensities when projected into the far-field regime. The paper describes the process of design, fabrication, and testing for two different version of the binary-phase grating; one designed for a 12 micron wavelength, referred to as the Long-Wavelength Infrared (LWIR) grating, and one designed for a 5 micron wavelength, referred to as the Mid-Wavelength Infrared Grating (MWIR).

Solid-state curved focal plane arrays

NASA Technical Reports Server (NTRS)

Jones, Todd (Inventor); Nikzad, Shouleh (Inventor); Hoenk, Michael (Inventor)

2010-01-01

The present invention relates to curved focal plane arrays. More specifically, the present invention relates to a system and method for making solid-state curved focal plane arrays from standard and high-purity devices that may be matched to a given optical system. There are two ways to make a curved focal plane arrays starting with the fully fabricated device. One way, is to thin the device and conform it to a curvature. A second way, is to back-illuminate a thick device without making a thinned membrane. The thick device is a special class of devices; for example devices fabricated with high purity silicon. One surface of the device (the non VLSI fabricated surface, also referred to as the back surface) can be polished to form a curved surface.

Fabrication and characterization of ordered arrays of nanostructures

NASA Astrophysics Data System (ADS)

Larson, Preston

2005-11-01

Nanostructures are currently of great interest because of their unique properties and potential applications in a wide range of areas such as opto-electronic and biomedical devices. Current research in nanotechnology involves fabrication and characterization of these structures, as well as theoretical and experimental studies to explore their unique and novel properties. Not only do nanostructures have the potential to be both evolutionary (state-of-the-art ICs have more and more features on the nanoscale) but revolutionary (quantum computing) as well. In this thesis, a combination of bottom-up and top-down approaches is explored to fabricate ordered arrays of nanostrucutures. The bottom-up approach involves the growth of self-organized porous anodic aluminum oxide (AAO) films. AAO films consist of a well ordered hexagonal array of close-packed pores with diameters and spacings ranging from around 5 to 500 nm. Via a top-down approach, these AAO films are then used as masks or templates to fabricate ordered arrays of nanostructures (i.e. dots, holes, meshes, pillars, rings, etc.) of various materials using conventional deposition and/or etching techniques. Using AAO films as masks allows a simple and economical method to fabricate arrays of structures with nano-scale dimensions. Furthermore, they allow the fabrication of large areas (many millimeters on a side) of highly uniform and well-ordered arrays of nanostructures, a crucial requirement for most characterization techniques and applications. Characterization of these nanostructures using various techniques (electron microscopy, atomic force microscopy, UV-Vis absorption spectroscopy, photoluminescence, capacitance-voltage measurements, magnetization hysteresis curves, etc.) will be presented. Finally, these structures provide a unique opportunity to determine the single and collective properties of nanostructure arrays and will have various future applications including but not limited to: data storage, light emitting or sensing devices, nano-tribological coatings for surfaces, bio-sensors, filters, and more.

Metallic Nanowire Interconnections for Integrated Circuit Fabrication

NASA Technical Reports Server (NTRS)

Ng, Hou Tee (Inventor); Li, Jun (Inventor); Meyyappan, Meyya (Inventor)

2007-01-01

A method for fabricating an electrical interconnect between two or more electrical components. A conductive layer is provided on a substarte and a thin, patterned catalyst array is deposited on an exposed surface of the conductive layer. A gas or vapor of a metallic precursor of a metal nanowire (MeNW) is provided around the catalyst array, and MeNWs grow between the conductive layer and the catalyst array. The catalyst array and a portion of each of the MeNWs are removed to provide exposed ends of the MeNWs.

Monolithic integration of an InP-based 4 × 25 GHz photodiode array to an O-band arrayed waveguide grating demultiplexer

NASA Astrophysics Data System (ADS)

Ye, Han; Han, Qin; Lv, Qianqian; Pan, Pan; An, Junming; Yang, Xiaohong

2017-12-01

We demonstrate the monolithic integration of a uni-traveling carrier photodiode array with a 4 channel, O-band arrayed waveguide grating demultiplexer on the InP platform by the selective area growth technique. An extended coupling layer at the butt-joint is adopted to ensure both good fabrication compatibility and high photodiode quantum efficiency of 77%. The fabricated integrated chip exhibits a uniform bandwidth over 25 GHz for each channel and a crosstalk below -22 dB.

TWO STARS TWO WAYS: CONFIRMING A MICROLENSING BINARY LENS SOLUTION WITH A SPECTROSCOPIC MEASUREMENT OF THE ORBIT

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yee, Jennifer C.; Johnson, John Asher; Eastman, Jason

Light curves of microlensing events involving stellar binaries and planetary systems can provide information about the orbital elements of the system due to orbital modulations of the caustic structure. Accurately measuring the orbit in either the stellar or planetary case requires detailed modeling of subtle deviations in the light curve. At the same time, the natural, Cartesian parameterization of a microlensing binary is partially degenerate with the microlens parallax. Hence, it is desirable to perform independent tests of the predictions of microlens orbit models using radial velocity (RV) time series of the lens binary system. To this end, we presentmore » 3.5 years of RV monitoring of the binary lens system OGLE-2009-BLG-020 L, for which Skowron et al. constrained all internal parameters of the 200–700 day orbit. Our RV measurements reveal an orbit that is consistent with the predictions of the microlens light curve analysis, thereby providing the first confirmation of orbital elements inferred from microlensing events.« less

Linear laser diode arrays for improvement in optical disk recording for space stations

NASA Technical Reports Server (NTRS)

Alphonse, G. A.; Carlin, D. B.; Connolly, J. C.

1990-01-01

The design and fabrication of individually addressable laser diode arrays for high performance magneto-optic recording systems are presented. Ten diode arrays with 30 mW cW light output, linear light vs. current characteristics and single longitudinal mode spectrum were fabricated using channel substrate planar (CSP) structures. Preliminary results on the inverse CSP structure, whose fabrication is less critically dependent on device parameters than the CSP, are also presented. The impact of systems parameters and requirements, in particular, the effect of feedback on laser design is assessed, and techniques to reduce feedback or minimize its effect on systems performance, including mode-stabilized structures, are evaluated.

Electro-pumped whispering gallery mode ZnO microlaser array

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zhu, G. Y.; State Key Laboratory of Bioelectronics, School of Electronic Science and Engineering, Southeast University, Nanjing 210096; Li, J. T.

2015-01-12

By employing vapor-phase transport method, ZnO microrods are fabricated and directly assembled on p-GaN substrate to form a heterostructural microlaser array, which avoids of the relatively complicated etching process comparing previous work. Under applied forward bias, whispering gallery mode ZnO ultraviolet lasing is obtained from the as-fabricated heterostructural microlaser array. The device's electroluminescence originates from three distinct electron-hole recombination processes in the heterojunction interface, and whispering gallery mode ultraviolet lasing is obtained when the applied voltage is beyond the lasing threshold. This work may present a significant step towards future fabrication of a facile technique for micro/nanolasers.

Density controlled carbon nanotube array electrodes

DOEpatents

Ren, Zhifeng F [Newton, MA; Tu, Yi [Belmont, MA

2008-12-16

CNT materials comprising aligned carbon nanotubes (CNTs) with pre-determined site densities, catalyst substrate materials for obtaining them and methods for forming aligned CNTs with controllable densities on such catalyst substrate materials are described. The fabrication of films comprising site-density controlled vertically aligned CNT arrays of the invention with variable field emission characteristics, whereby the field emission properties of the films are controlled by independently varying the length of CNTs in the aligned array within the film or by independently varying inter-tubule spacing of the CNTs within the array (site density) are disclosed. The fabrication of microelectrode arrays (MEAs) formed utilizing the carbon nanotube material of the invention is also described.

Fiber optical cable and connector system (FOCCoS) for PFS/ Subaru

NASA Astrophysics Data System (ADS)

de Oliveira, Antonio Cesar; de Oliveira, Lígia Souza; de Arruda, Marcio V.; Souza Marrara, Lucas; dos Santos, Leandro H.; Ferreira, Décio; dos Santos, Jesulino B.; Rosa, Josimar A.; Junior, Orlando V.; Pereira, Jeferson M.; Castilho, Bruno; Gneiding, Clemens; Junior, Laerte S.; de Oliveira, Claudia M.; Gunn, James; Ueda, Akitoshi; Takato, Naruhisa; Shimono, Atsushi; Sugai, Hajime; Karoji, Hiroshi; Kimura, Masahiko; Tamura, Naoyuki; Wang, Shiang-Yu; Murray, Graham; Le Mignant, David; Madec, Fabrice; Jaquet, Marc; Vives, Sebastien; Fisher, Charlie; Braun, David; Schwochert, Mark; Reiley, Daniel J.

2014-07-01

FOCCoS, "Fiber Optical Cable and Connector System" has the main function of capturing the direct light from the focal plane of Subaru Telescope using optical fibers, each one with a microlens in its tip, and conducting this light through a route containing connectors to a set of four spectrographs. The optical fiber cable is divided in 3 different segments called Cable A, Cable B and Cable C. Multi-fibers connectors assure precise connection among all optical fibers of the segments, providing flexibility for instrument changes. To assure strong and accurate connection, these sets are arranged inside two types of assemblies: the Tower Connector, for connection between Cable C and Cable B; and the Gang Connector, for connection between Cable B and Cable A. Throughput tests were made to evaluate the efficiency of the connections. A lifetime test connection is in progress. Cable C is installed inside the PFI, Prime Focus Instrument, where each fiber tip with a microlens is bonded to the end of the shaft of a 2-stage piezo-electric rotatory motor positioner; this assembly allows each fiber to be placed anywhere within its patrol region, which is 9.5mm diameter.. Each positioner uses a fiber arm to support the ferrule, the microlens, and the optical fiber. 2400 of these assemblies are arranged on a motor bench plate in a hexagonal-closed-packed disposition. All optical fibers from Cable C, protected by tubes, pass through the motors' bench plate, three modular plates and a strain relief box, terminating at the Tower Connector. Cable B is permanently installed at Subaru Telescope structure, as a link between Cable C and Cable A. This cable B starts at the Tower Connector device, placed on a lateral structure of the telescope, and terminates at the Gang Connector device. Cable B will be routed to minimize the compression, torsion and bending caused by the cable weight and telescope motion. In the spectrograph room, Cable A starts at the Gang Connector, crosses a distribution box and terminates in a slit device. Each slit device receives approximately 600 optical fibers, linearly arrayed in a curve for better orientation of the light to the spectrograph collimator mirror. Four sets of Gang Connectors, distribution boxes and Slit devices complete one Cable A. This paper will review the general design of the FOCCoS subsystem, methods used to manufacture the involved devices, and the needed tests results to evaluate the total efficiency of the set.

Programmable optical microshutter arrays for large aspect ratio microslits

NASA Astrophysics Data System (ADS)

Ilias, S.; Picard, F.; Larouche, C.; Kruzelecky, R.; Jamroz, W.; Le Noc, L.; Topart, P.

2008-06-01

Design, fabrication and characterization of a 16x1 programmable microshutter array are described. Each shutter controls the light transmitted through a microslit defined on the transparent substrate supporting the array. Two approaches were considered for the shutter array implementation: sweeping blades and zipping actuators. Simulation results and fabrication constraints led to the selection of the zipping actuators. The device was fabricated using a surface micromachining process. Each microshutter is basically an electrostatic zipping actuator having a curved shape induced by a stress gradient throughout the actuator thickness. When a sufficient voltage is applied between the microshutter and an actuation electrode surrounding the microslit area, the generated electrostatic force pulls the actuator down to the substrate which closes the microslit. Opening the slit relies on the restoring force due to the actuator deformation. Microshutter arrays were fabricated successfully. High light transmission through the slit area is obtained with the actuator in the open position and excellent light blocking is observed when the shutter is closed. Static and dynamic responses of the device were determined. A pull-in voltage of about 110 V closes the microslit and the response times to close and open the microslit are about 2 and 7 ms, respectively.

Advanced photovoltaic solar array development

NASA Technical Reports Server (NTRS)

Kurland, Richard M.; Stella, Paul

1989-01-01

Phase 2 of the Advanced Photovoltaic Solar Array (APSA) program, started in mid-1987, is currently in progress to fabricate prototype wing hardware that will lead to wing integration and testing in 1989. The design configuration and key details are reviewed. A status of prototype hardware fabricated to date is provided. Results from key component-level tests are discussed. Revised estimates of array-level performance as a function of solar cell device technology for geosynchronous missions are given.

Scalable Engineering of Quantum Optical Information Processing Architectures (SEQUOIA)

DTIC Science & Technology

2016-12-13

arrays. Figure 4: An 8-channel fiber-coupled SNSPD array. 1.4 Post -fabrication-tunable linear optic fabrication We have analyzed the...performance of the programmable nanophotonic processor (PNP) that is dynamically tunable via post -fabrication active phase tuning to predict the scaling of...various device losses. PACS numbers: 42.50. Ex , 03.67.Dd, 03.67.Lx, 42.50.Dv I. INTRODUCTION Quantum key distribution (QKD) enables two distant authenticated

Rigorous Electromagnetic Analysis of the Focusing Action of Refractive Cylindrical Microlens

NASA Astrophysics Data System (ADS)

Liu, Juan; Gu, Ben-Yuan; Dong, Bi-Zhen; Yang, Guo-Zhen

The focusing action of refractive cylindrical microlens is investigated based on the rigorous electromagnetic theory with the use of the boundary element method. The focusing behaviors of these refractive microlenses with continuous and multilevel surface-envelope are characterized in terms of total electric-field patterns, the electric-field intensity distributions on the focal plane, and their diffractive efficiencies at the focal spots. The obtained results are also compared with the ones obtained by Kirchhoff's scalar diffraction theory. The present numerical and graphical results may provide useful information for the analysis and design of refractive elements in micro-optics.

Development of nanostencil lithography and its applications for plasmonics and vibrational biospectroscopy

NASA Astrophysics Data System (ADS)

Aksu, Serap

Development of low cost nanolithography tools for precisely creating a variety of nanostructure shapes and arrangements in a high-throughput fashion is crucial for next generation biophotonic technologies. Although existing lithography techniques offer tremendous design flexibility, they have major drawbacks such as low-throughput and fabrication complexity. In addition the demand for the systematic fabrication of sub-100 nm structures on flexible, stretchable, non-planar nanoelectronic/photonic systems and multi-functional materials has fueled the research for innovative fabrication methods in recent years. This thesis research investigates a novel lithography approach for fabrication of engineered plasmonic nanostructures and metamaterials operating at visible and infrared wavelengths. The technique is called Nanostencil Lithography (NSL) and relies on direct deposition of materials through nanoapertures on a stencil. NSL enables high throughput fabrication of engineered antenna arrays with optical qualities similar to the ones fabricated by standard electron beam lithography. Moreover, nanostencils can be reused multiple times to fabricate series of plasmonic nanoantenna arrays with identical optical responses enabling high throughput manufacturing. Using nanostencils, very precise nanostructures could be fabricated with 10 nm accuracy. Furthermore, this technique has flexibility and resolution to create complex plasmonic nanostructure arrays on the substrates that are difficult to work with e-beam and ion beam lithography tools. Combining plasmonics with polymeric materials, biocompatible surfaces or curvilinear and non-planar objects enable unique optical applications since they can preserve normal device operation under large strain. In this work, mechanically tunable flexible optical materials and spectroscopy probes integrated on fiber surfaces that could be used for a wide range of applications are demonstrated. Finally, the first application of NSL fabricated low cost infrared nanoantenna arrays for plasmonically enhanced vibrational biospectroscopy is presented. Detection of immunologically important protein monolayers with thickness as small as 3 nm, and antibody assays are demonstrated using nanoantenna arrays fabricated with reusable nanostencils. The results presented indicate that nanostencil lithography is a promising method for reducing the nano manufacturing cost while enhancing the performance of biospectroscopy tools for biology and medicine. As a single step and low cost nanofabrication technique, NSL could facilitate the manufacturing of biophotonic technologies for real-world applications.

Fabrication of self-aligned, nanoscale, complex oxide varactors

NASA Astrophysics Data System (ADS)

Fu, Richard X.; Toonen, Ryan C.; Hirsch, Samuel G.; Ivill, Mathew P.; Cole, Melanie W.; Strawhecker, Kenneth E.

2015-01-01

Applications in ferroelectric random access memory and superparaelectric devices require the fabrication of ferroelectric capacitors at the nanoscale that exhibit extremely small leakage currents. To systematically study the material-size dependence of ferroelectric varactor performance, arrays of parallel-plate structures have been fabricated with nanoscale dielectric diameters. Electron beam lithography and inductively coupled plasma dry etching have been used to fabricate arrays of ferroelectric varactors using top electrodes as a self-aligned etch mask. Parallel-plate test structures using RF-sputtered Ba0.6Sr0.4TiO3 thin-films were used to optimize the fabrication process. Varactors with diameters down to 20 nm were successfully fabricated. Current-voltage (I-V) characteristics were measured to evaluate the significance of etch-damage and fabrication quality by ensuring low leakage currents through the structures.

A patterned ZnO nanorod array/gas sensor fabricated by mechanoelectrospinning-assisted selective growth.

PubMed

Wang, Xiaomei; Sun, Fazhe; Huang, Yongan; Duan, Yongqing; Yin, Zhouping

2015-02-21

Micropatterned ZnO nanorod arrays were fabricated by the mechanoelectrospinning-assisted direct-writing process and the hydrothermal growth process, and utilized as gas sensors that exhibited excellent Ohmic behavior and sensitivity response to oxidizing gas NO2 at low concentrations (1-100 ppm).

Array of Chemosensitive Resistors with Composites of Gas Chromatography (GC) Materials and Carbon Black for Detection and Recognition of VOCs: A Basic Study

PubMed Central

Wyszynski, Bartosz; Yatabe, Rui; Nakao, Atsuo; Nakatani, Masaya; Oki, Akio; Oka, Hiroaki; Toko, Kiyoshi

2017-01-01

Mimicking the biological olfaction, large odor-sensor arrays can be used to acquire a broad range of chemical information, with a potentially high degree of redundancy, to allow for enhanced control over the sensitivity and selectivity of artificial olfaction systems. The arrays should consist of the largest possible number of individual sensing elements while being miniaturized. Chemosensitive resistors are one of the sensing platforms that have a potential to satisfy these two conditions. In this work we test viability of fabricating a 16-element chemosensitive resistor array for detection and recognition of volatile organic compounds (VOCs). The sensors were fabricated using blends of carbon black and gas chromatography (GC) stationary-phase materials preselected based on their sorption properties. Blends of the selected GC materials with carbon black particles were subsequently coated over chemosensitive resistor devices and the resulting sensors/arrays evaluated in exposure experiments against vapors of pyrrole, benzenal, nonanal, and 2-phenethylamine at 150, 300, 450, and 900 ppb. Responses of the fabricated 16-element array were stable and differed for each individual odorant sample, proving the blends of GC materials with carbon black particles can be effectively used for fabrication of large odor-sensing arrays based on chemosensitive resistors. The obtained results suggest that the proposed sensing devices could be effective in discriminating odor/vapor samples at the sub-ppm level. PMID:28696353

Surface-enhanced Raman scattering active gold nanoparticle/nanohole arrays fabricated through electron beam lithography

NASA Astrophysics Data System (ADS)

Wu, Tsunghsueh; Lin, Yang-Wei

2018-03-01

Effective surface-enhanced Raman scattering (SERS)-active substrates from gold nanoparticle and gold nanohole arrays were successfully fabricated through electron beam lithography with precise computer-aided control of the unit size and intergap distance. Their SERS performance was evaluated using 4-mercaptobenzoic acid (4-MBA). These gold arrays yielded strong SERS signals under 785 nm laser excitation. The enhancement factors for 4-MBA molecules on the prepared gold nanoparticle and nanohole arrays maxed at 1.08 × 107 and 8.61 × 106, respectively. The observed increase in SERS enhancement was attributed to the localized surface plasmon resonance (LSPR) wavelength shifting toward the near-infrared regime when the gold nanohole diameter increased, in agreement with the theoretical prediction in this study. The contribution of LSPR to the Raman enhancement from nanohole arrays deposited on fluorine-doped tin oxide glass was elucidated by comparing SERS and transmission spectra. This simple fabrication procedure, which entails employing electron beam lithography and the controllability of the intergap distance, suggests highly promising uses of nanohole arrays as functional components in sensing and photonic devices.

Quick Fabrication of Large-area Organic Semiconductor Single Crystal Arrays with a Rapid Annealing Self-Solution-Shearing Method

PubMed Central

Li, Yunze; Ji, Deyang; Liu, Jie; Yao, Yifan; Fu, Xiaolong; Zhu, Weigang; Xu, Chunhui; Dong, Huanli; Li, Jingze; Hu, Wenping

2015-01-01

In this paper, we developed a new method to produce large-area single crystal arrays by using the organic semiconductor 9, 10-bis (phenylethynyl) anthracene (BPEA). This method involves an easy operation, is efficient, meets the demands of being low-cost and is independent of the substrate for large-area arrays fabrication. Based on these single crystal arrays, the organic field effect transistors exhibit the superior performance with the average mobility extracting from the saturation region of 0.2 cm2 V−1s−1 (the highest 0.47 cm2 V−1s−1) and on/off ratio exceeding 105. In addition, our single crystal arrays also show a very high photoswitch performance with an on/off current ratio up to 4.1 × 105, which is one of the highest values reported for organic materials. It is believed that this method provides a new way to fabricate single crystal arrays and has the potential for application to large area organic electronics. PMID:26282460

Large-format platinum silicide microwave kinetic inductance detectors for optical to near-IR astronomy.

PubMed

Szypryt, P; Meeker, S R; Coiffard, G; Fruitwala, N; Bumble, B; Ulbricht, G; Walter, A B; Daal, M; Bockstiegel, C; Collura, G; Zobrist, N; Lipartito, I; Mazin, B A

2017-10-16

We have fabricated and characterized 10,000 and 20,440 pixel Microwave Kinetic Inductance Detector (MKID) arrays for the Dark-speckle Near-IR Energy-resolved Superconducting Spectrophotometer (DARKNESS) and the MKID Exoplanet Camera (MEC). These instruments are designed to sit behind adaptive optics systems with the goal of directly imaging exoplanets in a 800-1400 nm band. Previous large optical and near-IR MKID arrays were fabricated using substoichiometric titanium nitride (TiN) on a silicon substrate. These arrays, however, suffered from severe non-uniformities in the TiN critical temperature, causing resonances to shift away from their designed values and lowering usable detector yield. We have begun fabricating DARKNESS and MEC arrays using platinum silicide (PtSi) on sapphire instead of TiN. Not only do these arrays have much higher uniformity than the TiN arrays, resulting in higher pixel yields, they have demonstrated better spectral resolution than TiN MKIDs of similar design. PtSi MKIDs also do not display the hot pixel effects seen when illuminating TiN on silicon MKIDs with photons with wavelengths shorter than 1 µm.

The fabrication of Ag nanoflake arrays via self-assembly on the surface of an anodic aluminum oxide template

NASA Astrophysics Data System (ADS)

Li, Xueming; Dong, Kun; Tang, Libin; Wu, Yongjun; Yang, Peizhi; Zhang, Pengxiang

2010-02-01

Vertical-aligned Ag nanoflake arrays are fabricated on the surface of an anodic aluminum oxide (AAO) template under a hydrothermal condition for the first time. The porous surface of AAO templates and the precursor solution may play key roles in the process of fabricating Ag nanoflakes. The rim of pores can provide many active sites for nucleation and growth, and then nanoflake arrays gradually form through self-assembly of Ag on the surface of AAO membranes. The product is characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM), and a growth mechanism of nanoflake is deduced. This work demonstrates that it is possible to make ordered nanoarrays without dissolving templates using the hydrothermal method, and this interesting Ag nanoflake arrays may provide a wider range of nanoscale applications.

Fabrication of ZnO Nanowires Arrays by Anodization and High-Vacuum Die Casting Technique, and Their Piezoelectric Properties.

PubMed

Kuo, Chin-Guo; Chang, Ho; Wang, Jian-Hao

2016-03-24

In this investigation, anodic aluminum oxide (AAO) with arrayed and regularly arranged nanopores is used as a template in the high-vacuum die casting of molten zinc metal (Zn) into the nanopores. The proposed technique yields arrayed Zn nanowires with an aspect ratio of over 600. After annealing, arrayed zinc oxide (ZnO) nanowires are obtained. Varying the anodizing time yields AAO templates with thicknesses of approximately 50 μm, 60 μm, and 70 μm that can be used in the fabrication of nanowires of three lengths with high aspect ratios. Experimental results reveal that a longer nanowire generates a greater measured piezoelectric current. The ZnO nanowires that are fabricated using an alumina template are anodized for 7 h and produce higher piezoelectric current of up to 69 pA.

Next-Generation Microshutter Arrays for Large-Format Imaging and Spectroscopy

NASA Technical Reports Server (NTRS)

Moseley, Samuel; Kutyrev, Alexander; Brown, Ari; Li, Mary

2012-01-01

A next-generation microshutter array, LArge Microshutter Array (LAMA), was developed as a multi-object field selector. LAMA consists of small-scaled microshutter arrays that can be combined to form large-scale microshutter array mosaics. Microshutter actuation is accomplished via electrostatic attraction between the shutter and a counter electrode, and 2D addressing can be accomplished by applying an electrostatic potential between a row of shutters and a column, orthogonal to the row, of counter electrodes. Microelectromechanical system (MEMS) technology is used to fabricate the microshutter arrays. The main feature of the microshutter device is to use a set of standard surface micromachining processes for device fabrication. Electrostatic actuation is used to eliminate the need for macromechanical magnet actuating components. A simplified electrostatic actuation with no macro components (e.g. moving magnets) required for actuation and latching of the shutters will make the microshutter arrays robust and less prone to mechanical failure. Smaller-size individual arrays will help to increase the yield and thus reduce the cost and improve robustness of the fabrication process. Reducing the size of the individual shutter array to about one square inch and building the large-scale mosaics by tiling these smaller-size arrays would further help to reduce the cost of the device due to the higher yield of smaller devices. The LAMA development is based on prior experience acquired while developing microshutter arrays for the James Webb Space Telescope (JWST), but it will have different features. The LAMA modular design permits large-format mosaicking to cover a field of view at least 50 times larger than JWST MSA. The LAMA electrostatic, instead of magnetic, actuation enables operation cycles at least 100 times faster and a mass significantly smaller compared to JWST MSA. Also, standard surface micromachining technology will simplify the fabrication process, increasing yield and reducing cost.

Fabrication of biomolecules self-assembled on Au nanodot array for bioelectronic device.

PubMed

Lee, Taek; Kumar, Ajay Yagati; Yoo, Si-Youl; Jung, Mi; Min, Junhong; Choi, Jeong-Woo

2013-09-01

In the present study, an nano-platform composed of Au nanodot arrays on which biomolecules could be self-assembled was developed and investigated for a stable bioelectronic device platform. Au nanodot pattern was fabricated using a nanoporous alumina template. Two different biomolecules, a cytochrome c and a single strand DNA (ssDNA), were immobilized on the Au nanodot arrays. Cytochorme c and single stranded DNA could be immobilized on the Au nanodot using the chemical linker 11-MUA and thiol-modification by covalent bonding, respectively. The atomic structure of the fabricated nano-platform device was characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The electrical conductivity of biomolecules immobilized on the Au nanodot arrays was confirmed by scanning tunneling spectroscopy (STS). To investigate the activity of biomolecule-immobilized Au-nano dot array, the cyclic voltammetry was carried out. This proposed nano-platform device, which is composed of biomolecules, can be used for the construction of a novel bioelectronic device.

Crosstalk Reduction for High-Frequency Linear-Array Ultrasound Transducers Using 1–3 Piezocomposites With Pseudo-Random Pillars

PubMed Central

Yang, Hao-Chung; Cannata, Jonathan; Williams, Jay; Shung, K. Kirk

2013-01-01

The goal of this research was to develop a novel diced 1–3 piezocomposite geometry to reduce pulse–echo ring down and acoustic crosstalk between high-frequency ultrasonic array elements. Two PZT-5H-based 1–3 composites (10 and 15 MHz) of different pillar geometries [square (SQ), 45° triangle (TR), and pseudo-random (PR)] were fabricated and then made into single-element ultrasound transducers. The measured pulse–echo waveforms and their envelopes indicate that the PR composites had the shortest −20-dB pulse length and highest sensitivity among the composites evaluated. Using these composites, 15-MHz array subapertures with a 0.95λ pitch were fabricated to assess the acoustic crosstalk between array elements. The combined electrical and acoustical crosstalk between the nearest array elements of the PR array sub-apertures (−31.8 dB at 15 MHz) was 6.5 and 2.2 dB lower than those of the SQ and the TR array subapertures, respectively. These results demonstrate that the 1–3 piezocomposite with the pseudo-random pillars may be a better choice for fabricating enhanced high-frequency linear-array ultrasound transducers; especially when mechanical dicing is used. PMID:23143580

In situ fabrication of Ni-Co (oxy)hydroxide nanowire-supported nanoflake arrays and their application in supercapacitors.

PubMed

Zheng, Xiaoyu; Quan, Honglin; Li, Xiaoxin; He, Hai; Ye, Qinglan; Xu, Xuetang; Wang, Fan

2016-09-29

Three-dimensional (3D) hybrid nanostructured arrays grown on a flexible substrate have recently attracted great attention owing to their potential application as supercapacitor electrodes in portable and wearable electronic devices. Here, we report an in situ conversion of Ni-Co active electrode materials for the fabrication of high-performance electrodes. Ni-Co carbonate hydroxide nanowire arrays on carbon cloth were initially synthesized via a hydrothermal method, and they were gradually converted to Ni-Co (oxy)hydroxide nanowire-supported nanoflake arrays after soaking in an alkaline solution. The evolution of the supercapacitor performance of the soaked electrode was investigated in detail. The areal capacitance increases from 281 mF cm -2 at 1 mA cm -2 to 3710 and 3900 mF cm -2 after soaking for 36 h and 48 h, respectively. More interestingly, the electrode also shows an increased capacitance with charge/discharge cycles due to the long-time soaking in KOH solution, suggesting novel cycling durability. The enhancement in capacitive performance should be related to the formation of a unique nanowire-supported nanoflake array architecture, which controls the agglomeration of nanoflakes, making them fully activated. As a result, the facile in situ fabrication of the hybrid architectural design in this study provides a new approach to fabricate high-performance Ni/Co based hydroxide nanostructure arrays for next-generation energy storage devices.

Morphology modulation of SrTiO3/TiO2 heterostructures for enhanced photoelectrochemical performance.

PubMed

Jiao, Zhengbo; Chen, Tao; Yu, Hongchao; Wang, Teng; Lu, Gongxuan; Bi, Yingpu

2014-04-01

Design and fabrication of nanoscale semiconductors with regulatable morphology or structure has attracted tremendous interest due to the dependency relationship between properties and architectures. Two types of SrTiO3/TiO2 nanocomposites with different morphologies and structures have been fabricated by controlling the kinetics of hydrothermal reactions. One is TiO2 nanotube arrays densely wrapped by SrTiO3 film and the other is SrTiO3 nanospheres distributed on the top region of TiO2 nanotube arrays, which has been firstly fabricated. It has been found that the photoelectrochemical performances of these heterostructures are crucially dominated by their architectures. Heterostructured SrTiO3/TiO2 nanotube arrays were fabricated by traditional method in the absence of NaOH and they exhibited higher photoelectrochemical performance than pure TiO2 nanotube arrays. However, the compact SrTiO3 coating film on the sidewalls of TiO2 nanotube arrays could inevitably destroy the tubular structures of TiO2 and thus go against the vectorial transport of electrons. Interestingly, when excess NaOH was added into the growth solution, SrTiO3 nanospheres would be rationally grafted on the top of TiO2 nanotube arrays, which could preserve the tubular structures of TiO2, and thus further improve the photoelectrochemical performance. Copyright © 2013 Elsevier Inc. All rights reserved.

Large-Area Fabrication of Droplet Pancake Bouncing Surface and Control of Bouncing State.

PubMed

Song, Jinlong; Gao, Mingqian; Zhao, Changlin; Lu, Yao; Huang, Liu; Liu, Xin; Carmalt, Claire J; Deng, Xu; Parkin, Ivan P

2017-09-26

Superhydrophobic pillar arrays, which can generate the droplet pancake bouncing phenomenon with reduced liquid-solid contact time, have huge application prospects in anti-icing of aircraft wings from freezing rain. However, the previously reported pillar arrays, suitable for obtaining pancake bouncing, have a diameter ≤100 μm and height-diameter ratio >10, which are difficult to fabricate over a large area. Here, we have systematically studied the influence of the dimension of the superhydrophobic pillar arrays on the bouncing dynamics of water droplets. We show that the typical pancake bouncing with 57.8% reduction in contact time with the surface was observed on the superhydrophobic pillar arrays with 1.05 mm diameter, 0.8 mm height, and 0.25 mm space. Such pillar arrays with millimeter diameter and <1 height-diameter ratio can be easily fabricated over large areas. Further, a simple replication-spraying method was developed for the large-area fabrication of the superhydrophobic pillar arrays to induce pancake bouncing. No sacrificial layer was needed to reduce the adhesion in the replication processes. Since the bouncing dynamics were rather sensitive to the space between the pillars, a method to control the contact time, bouncing shape, horizontal bouncing direction, and reversible switch between pancake bouncing and conventional bouncing was realized by adjusting the inclination angle of the shape memory polymer pillars.

Graded bit patterned magnetic arrays fabricated via angled low-energy He ion irradiation.

PubMed

Chang, L V; Nasruallah, A; Ruchhoeft, P; Khizroev, S; Litvinov, D

2012-07-11

A bit patterned magnetic array based on Co/Pd magnetic multilayers with a binary perpendicular magnetic anisotropy distribution was fabricated. The binary anisotropy distribution was attained through angled helium ion irradiation of a bit edge using hydrogen silsesquioxane (HSQ) resist as an ion stopping layer to protect the rest of the bit. The viability of this technique was explored numerically and evaluated through magnetic measurements of the prepared bit patterned magnetic array. The resulting graded bit patterned magnetic array showed a 35% reduction in coercivity and a 9% narrowing of the standard deviation of the switching field.

Array microscopy technology and its application to digital detection of Mycobacterium tuberculosis

NASA Astrophysics Data System (ADS)

McCall, Brian P.

Tuberculosis causes more deaths worldwide than any other curable infectious disease. This is the case despite tuberculosis appearing to be on the verge of eradication midway through the last century. Efforts at reversing the spread of tuberculosis have intensified since the early 1990s. Since then, microscopy has been the primary frontline diagnostic. In this dissertation, advances in clinical microscopy towards array microscopy for digital detection of Mycobacterium tuberculosis are presented. Digital array microscopy separates the tasks of microscope operation and pathogen detection and will reduce the specialization needed in order to operate the microscope. Distributing the work and reducing specialization will allow this technology to be deployed at the point of care, taking the front-line diagnostic for tuberculosis from the microscopy center to the community health center. By improving access to microscopy centers, hundreds of thousands of lives can be saved. For this dissertation, a lens was designed that can be manufactured as 4x6 array of microscopes. This lens design is diffraction limited, having less than 0.071 waves of aberration (root mean square) over the entire field of view. A total area imaged onto a full-frame digital image sensor is expected to be 3.94 mm2, which according to tuberculosis microscopy guidelines is more than sufficient for a sensitive diagnosis. The design is tolerant to single point diamond turning manufacturing errors, as found by tolerance analysis and by fabricating a prototype. Diamond micro-milling, a fabrication technique for lens array molds, was applied to plastic plano-concave and plano-convex lens arrays, and found to produce high quality optical surfaces. The micro-milling technique did not prove robust enough to produce bi-convex and meniscus lens arrays in a variety of lens shapes, however, and it required lengthy fabrication times. In order to rapidly prototype new lenses, a new diamond machining technique was developed called 4-axis single point diamond machining. This technique is 2-10x faster than micro-milling, depending on how advanced the micro-milling equipment is. With array microscope fabrication still in development, a single prototype of the lens designed for an array microscope was fabricated using single point diamond turning. The prototype microscope objective was validated in a pre-clinical trial. The prototype was compared with a standard clinical microscope objective in diagnostic tests. High concordance, a Fleiss's kappa of 0.88, was found between diagnoses made using the prototype and standard microscope objectives and a reference test. With the lens designed and validated and an advanced fabrication process developed, array microscopy technology is advanced to the point where it is feasible to rapidly prototype an array microscope for detection of tuberculosis and translate array microscope from an innovative concept to a device that can save lives.

Spatiotemporal and geometric optimization of sensor arrays for detecting analytes fluids

DOEpatents

Lewis, Nathan S.; Freund, Michael S.; Briglin, Shawn M.; Tokumaru, Phil; Martin, Charles R.; Mitchell, David T.

2006-10-17

Sensor arrays and sensor array systems for detecting analytes in fluids. Sensors configured to generate a response upon introduction of a fluid containing one or more analytes can be located on one or more surfaces relative to one or more fluid channels in an array. Fluid channels can take the form of pores or holes in a substrate material. Fluid channels can be formed between one or more substrate plates. Sensor can be fabricated with substantially optimized sensor volumes to generate a response having a substantially maximized signal to noise ratio upon introduction of a fluid containing one or more target analytes. Methods of fabricating and using such sensor arrays and systems are also disclosed.

Spatiotemporal and geometric optimization of sensor arrays for detecting analytes in fluids

DOEpatents

Lewis, Nathan S [La Canada, CA; Freund, Michael S [Winnipeg, CA; Briglin, Shawn S [Chittenango, NY; Tokumaru, Phillip [Moorpark, CA; Martin, Charles R [Gainesville, FL; Mitchell, David [Newtown, PA

2009-09-29

Sensor arrays and sensor array systems for detecting analytes in fluids. Sensors configured to generate a response upon introduction of a fluid containing one or more analytes can be located on one or more surfaces relative to one or more fluid channels in an array. Fluid channels can take the form of pores or holes in a substrate material. Fluid channels can be formed between one or more substrate plates. Sensor can be fabricated with substantially optimized sensor volumes to generate a response having a substantially maximized signal to noise ratio upon introduction of a fluid containing one or more target analytes. Methods of fabricating and using such sensor arrays and systems are also disclosed.

OGLE-2017-BLG-0329L: A Microlensing Binary Characterized with Dramatically Enhanced Precision Using Data from Space-based Observations

NASA Astrophysics Data System (ADS)

Han, C.; Calchi Novati, S.; Udalski, A.; Lee, C.-U.; Gould, A.; Bozza, V.; Mróz, P.; Pietrukowicz, P.; Skowron, J.; Szymański, M. K.; Poleski, R.; Soszyński, I.; Kozłowski, S.; Ulaczyk, K.; Pawlak, M.; Rybicki, K.; Iwanek, P.; The OGLE Collaboration; Albrow, M. D.; Chung, S.-J.; Hwang, K.-H.; Jung, Y. K.; Ryu, Y.-H.; Shin, I.-G.; Shvartzvald, Y.; Yee, J. C.; Zang, W.; Zhu, W.; Cha, S.-M.; Kim, D.-J.; Kim, H.-W.; Kim, S.-L.; Lee, D.-J.; Lee, Y.; Park, B.-G.; Pogge, R. W.; Kim, W.-T.; The KMTNet Collaboration; Beichman, C.; Bryden, G.; Carey, S.; Gaudi, B. S.; Henderson, C. B.; The Spitzer Team; Dominik, M.; Helling, C.; Hundertmark, M.; Jørgensen, U. G.; Longa-Peña, P.; Lowry, S.; Sajadian, S.; Burgdorf, M. J.; Campbell-White, J.; Ciceri, S.; Evans, D. F.; Haikala, L. K.; Hinse, T. C.; Rahvar, S.; Rabus, M.; Snodgrass, C.; The MiNDSTEp Collaboration

2018-06-01

Mass measurements of gravitational microlenses require one to determine the microlens parallax π E, but precise π E measurement, in many cases, is hampered due to the subtlety of the microlens-parallax signal combined with the difficulty of distinguishing the signal from those induced by other higher-order effects. In this work, we present the analysis of the binary-lens event OGLE-2017-BLG-0329, for which π E is measured with a dramatically improved precision using additional data from space-based Spitzer observations. We find that while the parallax model based on the ground-based data cannot be distinguished from a zero-π E model at the 2σ level, the addition of the Spitzer data enables us to identify two classes of solutions, each composed of a pair of solutions according to the well-known ecliptic degeneracy. It is found that the space-based data reduce the measurement uncertainties of the north and east components of the microlens-parallax vector {{\\boldsymbol{π }}}{{E}} by factors ∼18 and ∼4, respectively. With the measured microlens parallax combined with the angular Einstein radius measured from the resolved caustic crossings, we find that the lens is composed of a binary with component masses of either (M 1, M 2) ∼ (1.1, 0.8) M ⊙ or ∼(0.4, 0.3) M ⊙ according to the two solution classes. The first solution is significantly favored but the second cannot be securely ruled out based on the microlensing data alone. However, the degeneracy can be resolved from adaptive optics observations taken ∼10 years after the event.

Miniaturized diffraction based interferometric distance measurement sensor

NASA Astrophysics Data System (ADS)

Kim, Byungki

In this thesis, new metrology hardware is designed, fabricated, and tested to provide improvements over current MEMS metrology. The metrology system is a micromachined scanning interferometer (muSI) having a sub-nm resolution in a compact design. The proposed microinterferometer forms a phase sensitive diffraction grating with interferomeric sensitivity, while adding the capability of better lateral resolution by focusing the laser to a smaller spot size. A detailed diffraction model of the microinterferometer was developed to simulate the device performance and to suggest the location of photo detectors for integrated optoelectronics. A particular device is fabricated on a fused silica substrate using aluminum to form the deformable diffraction grating fingers and AZ P4620 photo resist (PR) for the microlens. The details of the fabrication processes are presented. The structure also enables optoelectronics to be integrated so that the interferometer with photo detectors can fit in an area that is 1 mm x 1 mm. The scanning results using a fixed grating muSI demonstrated that it could measure vibration profile as well as static vertical (less than a half wave length) and lateral dimension of MEMS. The muSI, which is integrated with photo diodes, demonstrated its operation by scanning a cMUT. The PID control has been tested and resulted in improvement in scanned images. The integrated muSI demonstrated that the deformable grating could be used to tune the measurement keep the interferometer in quadrature for highest sensitivity.

Fabrication of free-standing copper foils covered with highly-ordered copper nanowire arrays

NASA Astrophysics Data System (ADS)

Zaraska, Leszek; Sulka, Grzegorz D.; Jaskuła, Marian

2012-07-01

The through-hole nanoporous anodic aluminum oxide (AAO) membranes with relatively large surface area (ca. 2 cm2) were employed for fabrication of free-standing and mechanically stable copper foils covered with close-packed and highly-ordered copper nanowire arrays. The home-made AAO membranes with different pore diameters and interpore distances were fabricated via a two-step self-organized anodization of aluminum performed in sulfuric acid, oxalic acid and phosphoric acid followed by the pore opening/widening procedure. The direct current (DC) electrodeposition of copper was performed efficiently on both sides of AAO templates. The bottom side of the AAO templates was not insulated and consequently Cu nanowire arrays on thick Cu layers were obtained. The proposed template-assisted fabrication of free-standing copper nanowire array electrodes is a promising method for synthesis of nanostructured current collectors. The composition of Cu nanowires was confirmed by energy dispersive X-Ray spectroscopy (EDS) and X-ray diffraction (XRD) analyses. The structural features of nanowires were evaluated from field emission scanning electron microscopy (FE-SEM) images and compared with the characteristic parameters of anodic alumina membranes.

Arrays of ferromagnetic nanorings with variable thickness fabricated by capillary force lithography.

PubMed

Lee, Su Yeon; Jeong, Jong-Ryul; Kim, Shin-Hyun; Kim, Sarah; Yang, Seung-Man

2009-11-03

A new promising strategy is reported for the fabrication of ferromagnetic nanoring arrays with novel geometrical features through the use of capillary force lithography and subsequent reactive ion etching. In particular, we fabricated two different types of elliptic rings with variable width and height: one with pinching zones near the major axes and the other with pinching zones near the minor axes. We used PDMS stamps with either elliptic hole or antihole arrays for creating these elliptic rings with variable thickness by virtue of the uneven capillary rise, which was induced by the distributed Laplace pressure around the walls of elliptic holes or antiholes with nonuniform local curvatures. We transferred the polymer ring patterns to array of elliptical NiFe rings by Ar ion milling and characterized magnetic properties in terms of nonuniform ring width using magnetic force microscopy measurements. Our results demonstrated that the magnetic domain wall can be positioned in a controlled manner by using these novel elliptical ferromagnetic rings with local pinching zones and that the proposed CFL method can be utilized as a simple and effective fabrication tool.

Microfabricated ion trap array

DOEpatents

Blain, Matthew G [Albuquerque, NM; Fleming, James G [Albuquerque, NM

2006-12-26

A microfabricated ion trap array, comprising a plurality of ion traps having an inner radius of order one micron, can be fabricated using surface micromachining techniques and materials known to the integrated circuits manufacturing and microelectromechanical systems industries. Micromachining methods enable batch fabrication, reduced manufacturing costs, dimensional and positional precision, and monolithic integration of massive arrays of ion traps with microscale ion generation and detection devices. Massive arraying enables the microscale ion traps to retain the resolution, sensitivity, and mass range advantages necessary for high chemical selectivity. The reduced electrode voltage enables integration of the microfabricated ion trap array with on-chip circuit-based rf operation and detection electronics (i.e., cell phone electronics). Therefore, the full performance advantages of the microfabricated ion trap array can be realized in truly field portable, handheld microanalysis systems.

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.

PubMed

Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K

2010-10-01

This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.

Influence of anodization parameters on the morphology of TiO 2 nanotube arrays

NASA Astrophysics Data System (ADS)

Omidvar, Hamid; Goodarzi, Saba; Seif, Ahmad; Azadmehr, Amir R.

2011-07-01

TiO 2 nanotube arrays can be fabricated by electrochemical anodization in organic and inorganic electrolytes. Morphology of these nanotube arrays changes when anodization parameters such as applied voltage, type of electrolyte, time and temperature are varied. Nanotube arrays fabricated by anodization of commercial titanium in electrolytes containing NH 4F solution and either sulfuric or phosphoric acid were studied at room temperature; time of anodization was kept constant. Applied voltage, fluoride ion concentration, and acid concentrations were varied and their influences on TiO 2 nanotubes were investigated. The current density of anodizing was recorded by computer controlled digital multimeter. The surface morphology (top-view) of nanotube arrays were observed by SEM. The nanotube arrays in this study have inner diameters in range of 40-80 nm.

Development of a monolithic ferrite memory array

NASA Technical Reports Server (NTRS)

Heckler, C. H., Jr.; Bhiwandker, N. C.

1972-01-01

The results of the development and testing of ferrite monolithic memory arrays are presented. This development required the synthesis of ferrite materials having special magnetic and physical characteristics and the development of special processes; (1) for making flexible sheets (laminae) of the ferrite composition, (2) for embedding conductors in ferrite, and (3) bonding ferrite laminae together to form a monolithic structure. Major problems encountered in each of these areas and their solutions are discussed. Twenty-two full-size arrays were fabricated and fired during the development of these processes. The majority of these arrays were tested for their memory characteristics as well as for their physical characteristics and the results are presented. The arrays produced during this program meet the essential goals and demonstrate the feasibility of fabricating monolithic ferrite memory arrays by the processes developed.

Fabrication of ZnO Nanowires Arrays by Anodization and High-Vacuum Die Casting Technique, and Their Piezoelectric Properties

PubMed Central

Kuo, Chin-Guo; Chang, Ho; Wang, Jian-Hao

2016-01-01

In this investigation, anodic aluminum oxide (AAO) with arrayed and regularly arranged nanopores is used as a template in the high-vacuum die casting of molten zinc metal (Zn) into the nanopores. The proposed technique yields arrayed Zn nanowires with an aspect ratio of over 600. After annealing, arrayed zinc oxide (ZnO) nanowires are obtained. Varying the anodizing time yields AAO templates with thicknesses of approximately 50 μm, 60 μm, and 70 μm that can be used in the fabrication of nanowires of three lengths with high aspect ratios. Experimental results reveal that a longer nanowire generates a greater measured piezoelectric current. The ZnO nanowires that are fabricated using an alumina template are anodized for 7 h and produce higher piezoelectric current of up to 69 pA. PMID:27023546

Flexible and stackable terahertz metamaterials via silver-nanoparticle inkjet printing

NASA Astrophysics Data System (ADS)

Kashiwagi, K.; Xie, L.; Li, X.; Kageyama, T.; Miura, M.; Miyashita, H.; Kono, J.; Lee, S.-S.

2018-04-01

There is presently much interest in tunable, flexible, or reconfigurable metamaterial structures that work in the terahertz frequency range. They can be useful for a range of applications, including spectroscopy, sensing, imaging, and communications. Various methods based on microelectromechanical systems have been used for fabricating terahertz metamaterials, but they typically require high-cost facilities and involve a number of time-consuming and intricate processes. Here, we demonstrate a simple, robust, and cost-effective method for fabricating flexible and stackable multiresonant terahertz metamaterials, using silver nanoparticle inkjet printing. Using this method, we designed and fabricated two arrays of split-ring resonators (SRRs) having different resonant frequencies on separate sheets of paper and then combined the two arrays by stacking. Through terahertz time-domain spectroscopy, we observed resonances at the frequencies expected for the individual SRR arrays as well as at a new frequency due to coupling between the two SRR arrays.

Fabrication of ordered NiO coated Si nanowire array films as electrodes for a high performance lithium ion battery.

PubMed

Qiu, M C; Yang, L W; Qi, X; Li, Jun; Zhong, J X

2010-12-01

Highly ordered NiO coated Si nanowire array films are fabricated as electrodes for a high performance lithium ion battery via depositing Ni on electroless-etched Si nanowires and subsequently annealing. The structures and morphologies of as-prepared films are characterized by X-ray diffraction, scanning electron microscopy, and transmission electron microscopy. When the potential window versus lithium was controlled, the coated NiO can be selected to be electrochemically active to store and release Li+ ions, while highly conductive crystalline Si cores function as nothing more than a stable mechanical support and an efficient electrical conducting pathway. The hybrid nanowire array films exhibit superior cyclic stability and reversible capacity compared to that of NiO nanostructured films. Owing to the ease of large-scale fabrication and superior electrochemical performance, these hybrid nanowire array films will be promising anode materials for high performance lithium-ion batteries.

Micro-light-pipe array with an excitation attenuation filter for lensless digital enzyme-linked immunosorbent assay

NASA Astrophysics Data System (ADS)

Takehara, Hironari; Nagasaki, Mizuki; Sasagawa, Kiyotaka; Takehara, Hiroaki; Noda, Toshihiko; Tokuda, Takashi; Ohta, Jun

2016-03-01

Digital enzyme-linked immunosorbent assay (ELISA) is used for detecting various biomarkers with hypersensitivity. We have been developing compact systems by replacing the fluorescence microscope with a CMOS image sensor. Here, we propose a micro-light-pipe array structure made of metal filled with dye-doped resin, which can be used as a fabrication substrate of the micro-reaction-chamber array of digital ELISA. The possibility that this structure enhances the coupling efficiency for fluorescence was simulated using a simple model. To realize the structure, we fabricated a 30-µm-thick micropipe array by copper electroplating around a thick photoresist pattern. The typical diameter of each fabricated micropipe was 10 µm. The pipes were filled with yellow-dye-doped epoxy resin. The transmittance ratio of fluorescence and excitation light could be controlled by adjusting the doping concentration. We confirmed that an angled excitation light incidence suppressed the leakage of excitation light.

Fabrication of nano-gap electrode arrays by the construction and selective chemical etching of nano-crosswire stacks

NASA Technical Reports Server (NTRS)

Prokopuk, Nicholas (Inventor); Son, Kyung-Ah (Inventor)

2008-01-01

Methods of fabricating nano-gap electrode structures in array configurations, and the structures so produced. The fabrication method involves depositing first and second pluralities of electrodes comprising nanowires using processes such as lithography, deposition of metals, lift-off processes, and chemical etching that can be performed using conventional processing tools applicable to electronic materials processing. The gap spacing in the nano-gap electrode array is defined by the thickness of a sacrificial spacer layer that is deposited between the first and second pluralities of electrodes. The sacrificial spacer layer is removed by etching, thereby leaving a structure in which the distance between pairs of electrodes is substantially equal to the thickness of the sacrificial spacer layer. Electrode arrays with gaps measured in units of nanometers are produced. In one embodiment, the first and second pluralities of electrodes are aligned in mutually orthogonal orientations.

Sub-100-nm ordered silicon hole arrays by metal-assisted chemical etching

PubMed Central

2013-01-01

Sub-100-nm silicon nanohole arrays were fabricated by a combination of the site-selective electroless deposition of noble metals through anodic porous alumina and the subsequent metal-assisted chemical etching. Under optimum conditions, the formation of deep straight holes with an ordered periodicity (e.g., 100 nm interval, 40 nm diameter, and high aspect ratio of 50) was successfully achieved. By using the present method, the fabrication of silicon nanohole arrays with 60-nm periodicity was also achieved. PMID:24090268

Method for Fabricating and Packaging an M.Times.N Phased-Array Antenna

NASA Technical Reports Server (NTRS)

Xu, Xiaochuan (Inventor); Chen, Yihong (Inventor); Chen, Ray T. (Inventor); Subbaraman, Harish (Inventor)

2017-01-01

A method for fabricating an M.times.N, P-bit phased-array antenna on a flexible substrate is disclosed. The method comprising ink jet printing and hardening alignment marks, antenna elements, transmission lines, switches, an RF coupler, and multilayer interconnections onto the flexible substrate. The substrate of the M.times.N, P-bit phased-array antenna may comprise an integrated control circuit of printed electronic components such as, photovoltaic cells, batteries, resistors, capacitors, etc. Other embodiments are described and claimed.

A front-end wafer-level microsystem packaging technique with micro-cap array

NASA Astrophysics Data System (ADS)

Chiang, Yuh-Min

2002-09-01

The back-end packaging process is the remaining challenge for the micromachining industry to commercialize microsystem technology (MST) devices at low cost. This dissertation presents a novel wafer level protection technique as a final step of the front-end fabrication process for MSTs. It facilitates improved manufacturing throughput and automation in package assembly, wafer level testing of devices, and enhanced device performance. The method involves the use of a wafer-sized micro-cap array, which consists of an assortment of small caps micro-molded onto a material with adjustable shapes and sizes to serve as protective structures against the hostile environments during packaging. The micro-cap array is first constructed by a micromachining process with micro-molding technique, then sealed to the device wafer at wafer level. Epoxy-based wafer-level micro cap array has been successfully fabricated and showed good compatibility with conventional back-end packaging processes. An adhesive transfer technique was demonstrated to seal the micro cap array with a MEMS device wafer. No damage or gross leak was observed while wafer dicing or later during a gross leak test. Applications of the micro cap array are demonstrated on MEMS, microactuators fabricated using CRONOS MUMPS process. Depending on the application needs, the micro-molded cap can be designed and modified to facilitate additional component functions, such as optical, electrical, mechanical, and chemical functions, which are not easily achieved in the device by traditional means. Successful fabrication of a micro cap array comprised with microlenses can provide active functions as well as passive protection. An optical tweezer array could be one possibility for applications of a micro cap with microlenses. The micro cap itself could serve as micro well for DNA or bacteria amplification as well.

Micromachined capacitive ultrasonic immersion transducer array

NASA Astrophysics Data System (ADS)

Jin, Xuecheng

Capacitive micromachined ultrasonic transducers (cMUTs) have emerged as an attractive alternative to conventional piezoelectric ultrasonic transducers. They offer performance advantages of wide bandwidth and sensitivity that have heretofore been attainable. In addition, micromachining technology, which has benefited from the fast-growing microelectronics industry, enables cMUT array fabrication and electronics integration. This thesis describes the design and fabrication of micromachined capacitive ultrasonic immersion transducer arrays. The basic transducer electrical equivalent circuit is derived from Mason's theory. The effects of Lamb waves and Stoneley waves on cross coupling and acoustic losses are discussed. Electrical parasitics such as series resistance and shunt capacitance are also included in the model of the transducer. Transducer fabrication technology is systematically studied. Device dimension control in both vertical and horizontal directions, process alternatives and variations in membrane formation, via etch and cavity sealing, and metalization as well as their impact on transducer performance are summarized. Both 64 and 128 element 1-D array transducers are fabricated. Transducers are characterized in terms of electrical input impedance, bandwidth, sensitivity, dynamic range, impulse response and angular response, and their performance is compared with theoretical simulation. Various schemes for cross coupling reduction is analyzed, implemented, and verified with both experiments and theory. Preliminary results of immersion imaging are presented using 64 elements 1-D array transducers for active source imaging.

Demonstration of nanoimprinted hyperlens array for high-throughput sub-diffraction imaging

NASA Astrophysics Data System (ADS)

Byun, Minsueop; Lee, Dasol; Kim, Minkyung; Kim, Yangdoo; Kim, Kwan; Ok, Jong G.; Rho, Junsuk; Lee, Heon

2017-04-01

Overcoming the resolution limit of conventional optics is regarded as the most important issue in optical imaging science and technology. Although hyperlenses, super-resolution imaging devices based on highly anisotropic dispersion relations that allow the access of high-wavevector components, have recently achieved far-field sub-diffraction imaging in real-time, the previously demonstrated devices have suffered from the extreme difficulties of both the fabrication process and the non-artificial objects placement. This results in restrictions on the practical applications of the hyperlens devices. While implementing large-scale hyperlens arrays in conventional microscopy is desirable to solve such issues, it has not been feasible to fabricate such large-scale hyperlens array with the previously used nanofabrication methods. Here, we suggest a scalable and reliable fabrication process of a large-scale hyperlens device based on direct pattern transfer techniques. We fabricate a 5 cm × 5 cm size hyperlenses array and experimentally demonstrate that it can resolve sub-diffraction features down to 160 nm under 410 nm wavelength visible light. The array-based hyperlens device will provide a simple solution for much more practical far-field and real-time super-resolution imaging which can be widely used in optics, biology, medical science, nanotechnology and other closely related interdisciplinary fields.

The fabrication of ordered arrays of exchange biased Ni/FeF2 nanostructures.

PubMed

Kovylina, M; Erekhinsky, M; Morales, R; Schuller, I K; Labarta, A; Batlle, X

2010-04-30

The fabrication of ordered arrays of exchange biased Ni/FeF(2) nanostructures by focused ion beam lithography is reported. High quality nano-elements, with controlled removal depth and no significant re-deposition, were carved using small ion beam currents (30 pA), moderate dwell times (1 micros) and repeated passages over the same area. Two types of nanostructures were fabricated: square arrays of circular dots with diameters from 125 +/- 8 to 500 +/- 12 nm and periodicities ranging from 200 +/- 8 to 1000 +/- 12 nm, and square arrays of square antidots (207 +/- 8 nm in edge length) with periodicities ranging from 300 +/- 8 to 1200 +/- 12 nm. The arrays were characterized using scanning ion and electron microscopy, and atomic force microscopy. The effect of the patterning on the exchange bias field (i.e., the shift in the hysteresis loop of ferromagnetic Ni due to proximity to antiferromagnetic FeF(2)) was studied using magneto-transport measurements. These high quality nanostructures offer a unique method to address some of the open questions regarding the microscopic origin of exchange bias. This is not only of major relevance in the fabrication and miniaturization of magnetic devices but it is also one of the important proximity phenomena in nanoscience and materials science.

Fabrication of polydimethylsiloxane (PDMS) - based multielectrode array for neural interface.

PubMed

Kim, Jun-Min; Oh, Da-Rong; Sanchez, Joaquin; Kim, Shang-Hyub; Seo, Jong-Mo

2013-01-01

Flexible multielectrode arrays (MEAs) are being developed with various materials, and polyimide has been widely used due to the conveniece of process. Polyimide is developed in the form of photoresist. And this enable precise and reproducible fabrication. PDMS is another good candidate for MEA base material, but it has poor surface energy and etching property. In this paper, we proposed a better fabrication process that could modify PDMS surface for a long time and open the site of electrode and pad efficiently without PDMS etching.

Fabrication of Periodic Gold Nanocup Arrays Using Colloidal Lithography

DOE Office of Scientific and Technical Information (OSTI.GOV)

DeVetter, Brent M.; Bernacki, Bruce E.; Bennett, Wendy D.

Within recent years, the field of plasmonics has exploded as researchers have demonstrated exciting applications related to chemical and optical sensing in combination with new nanofabrication techniques. A plasmon is a quantum of charge density oscillation that lends nanoscale metals such as gold and silver unique optical properties. In particular, gold and silver nanoparticles exhibit localized surface plasmon resonances—collective charge density oscillations on the surface of the nanoparticle—in the visible spectrum. Here, we focus on the fabrication of periodic arrays of anisotropic plasmonic nanostructures. These half-shell (or nanocup) structures can exhibit additional unique light-bending and polarization dependent optical properties thatmore » simple isotropic nanostructures cannot. Researchers are interested in the fabrication of periodic arrays of nanocups for a wide variety of applications such as low-cost optical devices, surface-enhanced Raman scattering, and tamper indication. We present a scalable technique based on colloidal lithography in which it is possible to easily fabricate large periodic arrays of nanocups using spin-coating and self-assembled commercially available polymeric nanospheres. Electron microscopy and optical spectroscopy from the visible to near-IR was performed to confirm successful nanocup fabrication. We conclude with a demonstration of the transfer of nanocups to a flexible, conformal adhesive film.« less

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology.

PubMed

Llobet, J; Rius, G; Chuquitarqui, A; Borrisé, X; Koops, R; van Veghel, M; Perez-Murano, F

2018-04-02

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon nanowires (SiNWs). The functional structures are obtained by a top-down fabrication approach consisting in a resistless process based on focused ion beam irradiation, causing local gallium implantation and silicon amorphization, plus selective silicon etching by tetramethylammonium hydroxide, and a thermal annealing process in a boron rich atmosphere. The last step enables the electrical functionality of the irradiated material. Doubly clamped silicon beams are fabricated by this method. The electrical readout of their mechanical response can be addressed by a frequency down-mixing detection technique thanks to an enhanced piezoresistive transduction mechanism. Three specific aspects are discussed: (i) the engineering of mechanically coupled SiNWs, by making use of the nanometer scale overhang that it is inherently-generated with this fabrication process, (ii) the statistical distribution of patterned lateral dimensions when fabricating large arrays of identical devices, and (iii) the compatibility of the patterning methodology with CMOS circuits. Our results suggest that the application of this method to the integration of large arrays of suspended SiNWs with CMOS circuitry is interesting in view of applications such as advanced radio frequency band pass filters and ultra-high-sensitivity mass sensors.

Large Scale Triboelectric Nanogenerator and Self-Powered Pressure Sensor Array Using Low Cost Roll-to-Roll UV Embossing

PubMed Central

Dhakar, Lokesh; Gudla, Sudeep; Shan, Xuechuan; Wang, Zhiping; Tay, Francis Eng Hock; Heng, Chun-Huat; Lee, Chengkuo

2016-01-01

Triboelectric nanogenerators (TENGs) have emerged as a potential solution for mechanical energy harvesting over conventional mechanisms such as piezoelectric and electromagnetic, due to easy fabrication, high efficiency and wider choice of materials. Traditional fabrication techniques used to realize TENGs involve plasma etching, soft lithography and nanoparticle deposition for higher performance. But lack of truly scalable fabrication processes still remains a critical challenge and bottleneck in the path of bringing TENGs to commercial production. In this paper, we demonstrate fabrication of large scale triboelectric nanogenerator (LS-TENG) using roll-to-roll ultraviolet embossing to pattern polyethylene terephthalate sheets. These LS-TENGs can be used to harvest energy from human motion and vehicle motion from embedded devices in floors and roads, respectively. LS-TENG generated a power density of 62.5 mW m−2. Using roll-to-roll processing technique, we also demonstrate a large scale triboelectric pressure sensor array with pressure detection sensitivity of 1.33 V kPa−1. The large scale pressure sensor array has applications in self-powered motion tracking, posture monitoring and electronic skin applications. This work demonstrates scalable fabrication of TENGs and self-powered pressure sensor arrays, which will lead to extremely low cost and bring them closer to commercial production. PMID:26905285

Arrays of suspended silicon nanowires defined by ion beam implantation: mechanical coupling and combination with CMOS technology

NASA Astrophysics Data System (ADS)

Llobet, J.; Rius, G.; Chuquitarqui, A.; Borrisé, X.; Koops, R.; van Veghel, M.; Perez-Murano, F.

2018-04-01

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon nanowires (SiNWs). The functional structures are obtained by a top-down fabrication approach consisting in a resistless process based on focused ion beam irradiation, causing local gallium implantation and silicon amorphization, plus selective silicon etching by tetramethylammonium hydroxide, and a thermal annealing process in a boron rich atmosphere. The last step enables the electrical functionality of the irradiated material. Doubly clamped silicon beams are fabricated by this method. The electrical readout of their mechanical response can be addressed by a frequency down-mixing detection technique thanks to an enhanced piezoresistive transduction mechanism. Three specific aspects are discussed: (i) the engineering of mechanically coupled SiNWs, by making use of the nanometer scale overhang that it is inherently-generated with this fabrication process, (ii) the statistical distribution of patterned lateral dimensions when fabricating large arrays of identical devices, and (iii) the compatibility of the patterning methodology with CMOS circuits. Our results suggest that the application of this method to the integration of large arrays of suspended SiNWs with CMOS circuitry is interesting in view of applications such as advanced radio frequency band pass filters and ultra-high-sensitivity mass sensors.

Anisotropic Janus Si nanopillar arrays as a microfluidic one-way valve for gas-liquid separation

NASA Astrophysics Data System (ADS)

Wang, Tieqiang; Chen, Hongxu; Liu, Kun; Li, Yang; Xue, Peihong; Yu, Ye; Wang, Shuli; Zhang, Junhu; Kumacheva, Eugenia; Yang, Bai

2014-03-01

In this paper, we demonstrate a facile strategy for the fabrication of a one-way valve for microfluidic (MF) systems. The micro-valve was fabricated by embedding arrays of Janus Si elliptical pillars (Si-EPAs) with anisotropic wettability into a MF channel fabricated in poly(dimethylsiloxane) (PDMS). Two sides of the Janus pillar are functionalized with molecules with distinct surface energies. The ability of the Janus pillar array to act as a valve was proved by investigating the flow behaviour of water in a T-shaped microchannel at different flow rates and pressures. In addition, the one-way valve was used to achieve gas-liquid separation. We believe that the Janus Si-EPAs modified by specific surface functionalization provide a new strategy to control the flow and motion of fluids in MF channels.In this paper, we demonstrate a facile strategy for the fabrication of a one-way valve for microfluidic (MF) systems. The micro-valve was fabricated by embedding arrays of Janus Si elliptical pillars (Si-EPAs) with anisotropic wettability into a MF channel fabricated in poly(dimethylsiloxane) (PDMS). Two sides of the Janus pillar are functionalized with molecules with distinct surface energies. The ability of the Janus pillar array to act as a valve was proved by investigating the flow behaviour of water in a T-shaped microchannel at different flow rates and pressures. In addition, the one-way valve was used to achieve gas-liquid separation. We believe that the Janus Si-EPAs modified by specific surface functionalization provide a new strategy to control the flow and motion of fluids in MF channels. Electronic supplementary information (ESI) available: The XPS spectrum of the as-prepared Janus arrays after the MHA modification; the SEM images of the PFS-MHA Janus Si pillar arrays fabricated through oblique evaporation of gold along the short axis of the elliptical pillars; images of the cross-shaped MF channel and Rhodamine aqueous solution injecting in a cross-shaped MF channel taken at different times; the plot data of DPFS/DMHA against the flow rate of the aqueous solution; the plot data of failure pressure against the bottom size of the channel; optical microscopy images of the Janus pillar array with less density of pillars; optical microscopy images of the T junction with higher magnification; the video of Rhodamine solution running in the T-shaped microchannel integrated with the Janus Si-EPAs; the video of the entire gas-liquid separation process. See DOI: 10.1039/c3nr05865d

Preparation of Janus Particles and Alternating Current Electrokinetic Measurements with a Rapidly Fabricated Indium Tin Oxide Electrode Array.

PubMed

Chen, Yu-Liang; Jiang, Hong-Ren

2017-06-23

This article provides a simple method to prepare partially or fully coated metallic particles and to perform the rapid fabrication of electrode arrays, which can facilitate electrical experiments in microfluidic devices. Janus particles are asymmetric particles that contain two different surface properties on their two sides. To prepare Janus particles, a monolayer of silica particles is prepared by a drying process. Gold (Au) is deposited on one side of each particle using a sputtering device. The fully coated metallic particles are completed after the second coating process. To analyze the electrical surface properties of Janus particles, alternating current (AC) electrokinetic measurements, such as dielectrophoresis (DEP) and electrorotation (EROT)- which require specifically designed electrode arrays in the experimental device- are performed. However, traditional methods to fabricate electrode arrays, such as the photolithographic technique, require a series of complicated procedures. Here, we introduce a flexible method to fabricate a designed electrode array. An indium tin oxide (ITO) glass is patterned by a fiber laser marking machine (1,064 nm, 20 W, 90 to 120 ns pulse-width, and 20 to 80 kHz pulse repetition frequency) to create a four-phase electrode array. To generate the four-phase electric field, the electrodes are connected to a 2-channel function generator and to two invertors. The phase shift between the adjacent electrodes is set at either 90° (for EROT) or 180° (for DEP). Representative results of AC electrokinetic measurements with a four-phase ITO electrode array are presented.

Polymeric waveguide array with 45 degree slopes fabricated by bottom side tilted exposure

NASA Astrophysics Data System (ADS)

Lin, Xiaohui; Dou, Xinyuan; Wang, Alan X.; Chen, Ray T.

2011-01-01

This paper demonstrated a practical fabrication process of polymeric waveguide array (12 channels) with 50μm(W)×50μm(H)×23mm(L) dimension and mirror embedded 45° degree slopes for vertical coupling purpose. The entire process contained three main parts: a SU8 pre-mold with 45° slope, a PDMS mold and the final waveguide array device. The key step of fabricating the pre-mold included a bottom side tilted exposure of SU8 photo resist. By placing the sample upside down, tilting by 58.7° and immersing into DI water, the ultraviolet (UV) beam that shined vertically was directed to go through from the bottom of the glass substrate into top side SU8 resist with 45° angle to form the surface. This method was able to guarantee no-gap contact between the mask pattern and the photo resist when exposing. By comparing the process complexity and achieved structure of the top and bottom side exposure, the later was proved to be a promising method for making high quality tilted structure without any tailing effect. The reversed PDMS mold was then fabricated on the SU8 pre-mold. The PDMS mold was used to imprint the cladding layer of the waveguide array. After metal deposition, core filling and top cladding layer coating, the final polymeric waveguide array device was achieved. For performance evaluation, 850nm laser beam from VCSEL was modulated to 10Gbps signals and vertically coupled into the waveguide array. The eye diagrams revealed high Q factor when transmitting signals along these waveguide array.

Liquid Tunable Microlenses based on MEMS techniques

PubMed Central

Zeng, Xuefeng; Jiang, Hongrui

2013-01-01

The recent rapid development in microlens technology has provided many opportunities for miniaturized optical systems, and has found a wide range of applications. Of these microlenses, tunable-focus microlenses are of special interest as their focal lengths can be tuned using micro-scale actuators integrated with the lens structure. Realization of such tunable microlens generally relies on the microelectromechanical system (MEMS) technologies. Here, we review the recent progress in tunable liquid microlenses. The underlying physics relevant to these microlenses are first discussed, followed by description of three main categories of tunable microlenses involving MEMS techniques, mechanically driven, electrically driven, and those integrated within microfluidic systems. PMID:24163480

Mismatch Considerations in Excitation of Single-Mode Circular Core Parabolic Index Fiber by Laser Diode via Upside Down Tapered Hemispherical Microlens on the Tip of the Fiber

NASA Astrophysics Data System (ADS)

Das, Bishuddhananda; Middya, Tapas Ranjan; Gangopadhyay, Sankar

2017-12-01

We report the theoretical investigation of the coupling optics involving laser diode to single-mode circular core parabolic index fiber via upside down tapered hemispherical microlens on the tip of the fiber in the presence of possible transverse and angular mismatches. Using the relevant ABCD matrix for such tapered hemispherical microlens, we formulate analytical expressions for the coupling efficiencies in the presence of the said two mismatches. Further, the transmitted spot size of the source via the hemispherical lens and the tapered region should match with the spot size of the fiber for obtaining maximum coupling. The investigations have been made for two practical wavelengths, namely 1.3 and 1.5 μm in order to find the tolerance of this coupling device with respect to the said kinds of mismatches at the concerned wavelengths. Although our simple method predicts the concerned coupling optics excellently, the evaluation of the concerned efficiencies and associated losses involve little computations. Thus this user-friendly technique and also the results found thereof will benefit the designers and packagers who are working in the field of optical technology.

Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism

NASA Astrophysics Data System (ADS)

Michalicek, M. Adrian; Bright, Victor M.

2001-10-01

This paper presents the design, fabrication, modeling, and testing of various arrays of cantilever micromirror devices integrated atop CMOS control electronics. The upper layers of the arrays are prefabricated in the MUMPs process and then flip-chip transferred to CMOS receiving modules using a novel latching off-chip hinge mechanism. This mechanism allows the micromirror arrays to be released, rotated off the edge of the host module and then bonded to the receiving module using a standard probe station. The hinge mechanism supports the arrays by tethers that are severed to free the arrays once bonded. The resulting devices are inherently planarized since the bottom of the first releasable MUMPs layer becomes the surface of the integrated mirror. The working devices are formed by mirror surfaces bonded to address electrodes fabricated above static memory cells on the CMOS module. These arrays demonstrate highly desirable features such as compatible address potentials, less than 2 nm of RMS roughness, approximately 1 micrometers of lateral position accuracy and the unique ability to metallize reflective surfaces without masking. Ultimately, the off-chip hinge mechanism enables very low-cost, simple, reliable, repeatable and accurate assembly of advanced MEMS and integrated microsystems without specialized equipment or complex procedures.

MEMS based hair flow-sensors as model systems for acoustic perception studies

NASA Astrophysics Data System (ADS)

Krijnen, Gijs J. M.; Dijkstra, Marcel; van Baar, John J.; Shankar, Siripurapu S.; Kuipers, Winfred J.; de Boer, Rik J. H.; Altpeter, Dominique; Lammerink, Theo S. J.; Wiegerink, Remco

2006-02-01

Arrays of MEMS fabricated flow sensors inspired by the acoustic flow-sensitive hairs found on the cerci of crickets have been designed, fabricated and characterized. The hairs consist of up to 1 mm long SU-8 structures mounted on suspended membranes with normal translational and rotational degrees of freedom. Electrodes on the membrane and on the substrate form variable capacitors, allowing for capacitive read-out. Capacitance versus voltage, frequency dependence and directional sensitivity measurements have been successfully carried out on fabricated sensor arrays, showing the viability of the concept. The sensors form a model system allowing for investigations on sensory acoustics by their arrayed nature, their adaptivity via electrostatic interaction (frequency tuning and parametric amplification) and their susceptibility to noise (stochastic resonance).

CMOS-micromachined, two-dimenisional transistor arrays for neural recording and stimulation.

PubMed

Lin, J S; Chang, S R; Chang, C H; Lu, S C; Chen, H

2007-01-01

In-plane microelectrode arrays have proven to be useful tools for studying the connectivities and the functions of neural tissues. However, seldom microelectrode arrays are monolithically-integrated with signal-processing circuits, without which the maximum number of electrodes is limited by the compromise with routing complexity and interferences. This paper proposes a CMOS-compatible, two-dimensional array of oxide-semiconductor field-effect transistors(OSFETs), capable of both recording and stimulating neuronal activities. The fabrication of the OSFETs not only requires simply die-level, post-CMOS micromachining process, but also retains metal layers for monolithic integration with signal-processing circuits. A CMOS microsystem containing the OSFET arrays and gain-programmable recording circuits has been fabricated and tested. The preliminary testing results are presented and discussed.

Experimental demonstration of a multi-wavelength distributed feedback semiconductor laser array with an equivalent chirped grating profile based on the equivalent chirp technology.

PubMed

Li, Wangzhe; Zhang, Xia; Yao, Jianping

2013-08-26

We report, to the best of our knowledge, the first realization of a multi-wavelength distributed feedback (DFB) semiconductor laser array with an equivalent chirped grating profile based on equivalent chirp technology. All the lasers in the laser array have an identical grating period with an equivalent chirped grating structure, which are realized by nonuniform sampling of the gratings. Different wavelengths are achieved by changing the sampling functions. A multi-wavelength DFB semiconductor laser array is fabricated and the lasing performance is evaluated. The results show that the equivalent chirp technology is an effective solution for monolithic integration of a multi-wavelength laser array with potential for large volume fabrication.

Design and fabrication of a flexible substrate microelectrode array for brain machine interfaces.

PubMed

Patrick, Erin; Ordonez, Matthew; Alba, Nicolas; Sanchez, Justin C; Nishida, Toshikazu

2006-01-01

We report a neural microelectrode array design that leverages the recording properties of conventional microwire electrode arrays with the additional features of precise control of the electrode geometries. Using microfabrication techniques, a neural probe array is fabricated that possesses a flexible polyimide-based cable. The performance of the design was tested with electrochemical impedance spectroscopy and in vivo studies. The gold-plated electrode site has an impedance value of 0.9 M Omega at 1 kHz. Acute neural recording provided high neuronal yields, peak-to-peak amplitudes (as high as 100 microV), and signal-to-noise ratios (27 dB).

Quadrupole ion traps and trap arrays: geometry, material, scale, performance.

PubMed

Ouyang, Z; Gao, L; Fico, M; Chappell, W J; Noll, R J; Cooks, R G

2007-01-01

Quadrupole ion traps are reviewed, emphasizing recent developments, especially the investigation of new geometries, guided by multiple particle simulations such as the ITSIM program. These geometries include linear ion traps (LITs) and the simplified rectilinear ion trap (RIT). Various methods of fabrication are described, including the use of rapid prototyping apparatus (RPA), in which 3D objects are generated through point-by-point laser polymerization. Fabrication in silicon using multilayer semi-conductor fabrication techniques has been used to construct arrays of micro-traps. The performance of instruments containing individual traps as well as arrays of traps of various sizes and geometries is reviewed. Two types of array are differentiated. In the first type, trap arrays constitute fully multiplexed mass spectrometers in which multiple samples are examined using multiple sources, analyzers and detectors, to achieve high throughput analysis. In the second, an array of individual traps acts collectively as a composite trap to increase trapping capacity and performance for a single sample. Much progress has been made in building miniaturized mass spectrometers; a specific example is a 10 kg hand-held tandem mass spectrometer based on the RIT mass analyzer. The performance of this instrument in air and water analysis, using membrane sampling, is described.

Synergism of Dewetting and Self-Wrinkling To Create Two-Dimensional Ordered Arrays of Functional Microspheres.

PubMed

Han, Xue; Hou, Jing; Xie, Jixun; Yin, Jian; Tong, Yi; Lu, Conghua; Möhwald, Helmuth

2016-06-29

Here we report a simple, novel, yet robust nonlithographic method for the controlled fabrication of two-dimensional (2-D) ordered arrays of polyethylene glycol (PEG) microspheres. It is based on the synergistic combination of two bottom-up processes enabling periodic structure formation for the first time: dewetting and the mechanical wrinkle formation. The deterministic dewetting results from the hydrophilic polymer PEG on an incompatible polystyrene (PS) film bound to a polydimethylsiloxane (PDMS) substrate, which is directed both by a wrinkled template and by the template-directed in-situ self-wrinkling PS/PDMS substrate. Two strategies have been introduced to achieve synergism to enhance the 2-D ordering, i.e., employing 2-D in-situ self-wrinkling substrates and boundary conditions. As a result, we achieve highly ordered 2-D arrays of PEG microspheres with desired self-organized microstructures, such as the array location (e.g., selectively on the crest/in the valley of the wrinkles), diameter, spacing of the microspheres, and array direction. Additionally, the coordination of PEG with HAuCl4 is utilized to fabricate 2-D ordered arrays of functional PEG-HAuCl4 composite microspheres, which are further converted into different Au nanoparticle arrays. This simple versatile combined strategy could be extended to fabricate highly ordered 2-D arrays of other functional materials and achieve desirable properties and functionalities.

Tubular fluoropolymer arrays with high piezoelectric response

NASA Astrophysics Data System (ADS)

Zhukov, Sergey; Eder-Goy, Dagmar; Biethan, Corinna; Fedosov, Sergey; Xu, Bai-Xiang; von Seggern, Heinz

2018-01-01

Polymers with electrically charged internal air cavities called ferroelectrets exhibit a pronounced piezoelectric effect and are regarded as soft functional materials suitable for sensor and actuator applications. In this work, a simple method for fabricating piezoelectret arrays with open-tubular channels is introduced. A set of individual fluoroethylenepropylene (FEP) tubes is compressed between two heated metal plates. The squeezed FEP tubes are melted together at +270 °C. The resulting structure is a uniform, multi-tubular, flat array that reveals a strong piezoelectric response after a poling step. The fabricated arrays have a high ratio between piezoelectrically active and non-active areas. The optimal charging voltage and stability of the piezoelectric coefficients with pressures and frequency were experimentally investigated for two specific array structures with wall thickness of 50 and 120 μm. The array fabricated from 50 μm thick FEP tubes reveals a stable and high piezoelectric coefficient of {d}33 = 120-160 pC N-1 with a flat frequency response between 0.1 Hz and 10 kHz for pressures between 1 and 100 kPa. An increase of wall thickness to 120 μm is accompanied by a more than twofold decrease in the piezoelectric coefficient as a result of a simultaneously higher effective array stiffness and lower remanent polarization. The obtained experimental results can be used to optimize the array design with regard to the electromechanical performance.

MBE HgCdTe for HDVIP Devices: Horizontal Integration in the US HgCdTe FPA Industry

NASA Astrophysics Data System (ADS)

Aqariden, F.; Elsworth, J.; Zhao, J.; Grein, C. H.; Sivananthan, S.

2012-10-01

Molecular beam epitaxy (MBE) growth of HgCdTe offers the possibility of fabricating multilayer device structures with an almost unlimited choice of infrared sensor designs for focal-plane array (FPA) fabrication. HgCdTe offers two major advantages that explain its dominance in the infrared photon detector marketplace. The thermal generation rate per unit volume of the material is lower and the quantum efficiency for photon absorption in the infrared is higher in HgCdTe than in any competing material—it yields devices with quantum efficiencies as high as 0.99. Recently, EPIR Technologies and DRS Infrared Technologies agreed to collaborate and examine: (i) the feasibility of employing MBE HgCdTe in the fabrication of high-density vertically interconnected photodiodes (HDVIPs), which are usually fabricated with liquid-phase epitaxy material, and (ii) the potential benefits of horizontal integration, with EPIR supplying the MBE materials to DRS for device and array fabrication. The team designed and developed passivation-absorber-passivation structures that are heavily used by DRS. This paper provides an overview of the characteristics of HDVIP devices and arrays fabricated from MBE HgCdTe and the anticipated advantages of horizontal integration in the industry. Material growth, device fabrication, and test results are presented.

Electrowetting-based adaptive vari-focal liquid lens array for 3D display

NASA Astrophysics Data System (ADS)

Won, Yong Hyub

2014-10-01

Electrowetting is a phenomenon that can control the surface tension of liquid when a voltage is applied. This paper introduces the fabrication method of liquid lens array by the electrowetting phenomenon. The fabricated 23 by 23 lens array has 1mm diameter size with 1.6 mm interval distance between adjacent lenses. The diopter of each lens was - 24~27 operated at 0V to 50V. The lens array chamber fabricated by Deep Reactive-Ion Etching (DRIE) is deposited with IZO and parylene C and tantalum oxide. To prevent water penetration and achieve high dielectric constant, parylene C and tantalum oxide (ɛ = 23 ~ 25) are used respectively. Hydrophobic surface which enables the range of contact angle from 60 to 160 degree is coated to maximize the effect of electrowetting causing wide band of dioptric power. Liquid is injected into each lens chamber by two different ways. First way was self water-oil dosing that uses cosolvent and diffusion effect, while the second way was micro-syringe by the hydrophobic surface properties. To complete the whole process of the lens array fabrication, underwater sealing was performed using UV adhesive that does not dissolve in water. The transient time for changing from concave to convex lens was measured <33ms (at frequency of 1kHz AC voltage.). The liquid lens array was tested unprecedentedly for integral imaging to achieve more advanced depth information of 3D image.

Design and fabrication of reflective spatial light modulator for high-dynamic-range wavefront control

NASA Astrophysics Data System (ADS)

Zhu, Hao; Bierden, Paul; Cornelissen, Steven; Bifano, Thomas; Kim, Jin-Hong

2004-10-01

This paper describes design and fabrication of a microelectromechanical metal spatial light modulator (SLM) integrated with complementary metal-oxide semiconductor (CMOS) electronics, for high-dynamic-range wavefront control. The metal SLM consists of a large array of piston-motion MEMS mirror segments (pixels) which can deflect up to 0.78 µm each. Both 32x32 and 150x150 arrays of the actuators (1024 and 22500 elements respectively) were fabricated onto the CMOS driver electronics and individual pixels were addressed. A new process has been developed to reduce the topography during the metal MEMS processing to fabricate mirror pixels with improved optical quality.

Micro-Machined High-Frequency (80 MHz) PZT Thick Film Linear Arrays

PubMed Central

Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K. Kirk

2010-01-01

This paper presents the development of a micro-machined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT solgel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (−6 dB) of 60%. An insertion loss of −41 dB and adjacent element crosstalk of −21 dB were found at the center frequency. PMID:20889407

Fabrication of a stretchable solid-state micro-supercapacitor array.

PubMed

Kim, Daeil; Shin, Gunchul; Kang, Yu Jin; Kim, Woong; Ha, Jeong Sook

2013-09-24

We fabricated a stretchable micro-supercapacitor array with planar SWCNT electrodes and an ionic liquid-based triblock copolymer electrolyte. The mechanical stability of the entire supercapacitor array upon stretching was obtained by adopting strategic design concepts. First, the narrow and long serpentine metallic interconnections were encapsulated with polyimide thin film to ensure that they were within the mechanical neutral plane. Second, an array of two-dimensional planar micro-supercapacitor with SWCNT electrodes and an ion-gel-type electrolyte was made to achieve all-solid-state energy storage devices. The formed micro-supercapacitor array showed excellent performances which were stable over stretching up to 30% without any noticeable degradation. This work shows the strong potential of a stretchable micro-supercapacitor array in applications such as wearable computers, power dressing, electronic newspapers, paper-like mobile phones, and other easily collapsible gadgets.

Design, Fabrication, and Testing of a TiN Ti TiN Trilayer KID Array for 3mm CMB Observations

NASA Technical Reports Server (NTRS)

Lowitz, A. E.; Brown, A. D.; Mikula, V.; Stevenson, T. R.; Timbie, P. T.; Wollack, E. J.

2016-01-01

Kinetic inductance detectors (KIDs) are a promising technology for astronomical observations over a wide range of wavelengths in the mm and sub-mm regime. Simple fabrication, in as little as one lithographic layer, and passive frequency-domain multiplexing, with readout of up to 1000 pixels on a single line with a single cold amplifier, make KIDs an attractive solution for high-pixel-count detector arrays. We are developing an array that optimizes KIDs for optical frequencies near 100GHz to expand their usefulness in mm-wave applications, with a particular focus on CMBB-mode measurement efforts in association with the QUBIC telescope. We have designed, fabricated, and tested a 20-pixel prototype array using a simple quasi lumped microstrip design and pulsed DC reactive magnetron-sputtered TiNTiTiN trilayer resonators, optimized for detecting 100GHz (3mm) signals. Here we present a discussion of design considerations for the array, as well as preliminary detector characterization measurements and results from a study of TiN trilayer properties.

Two-Dimensional Si-Nanodisk Array Fabricated Using Bio-Nano-Process and Neutral Beam Etching for Realistic Quantum Effect Devices

NASA Astrophysics Data System (ADS)

Huang, Chi-Hsien; Igarashi, Makoto; Woné, Michel; Uraoka, Yukiharu; Fuyuki, Takashi; Takeguchi, Masaki; Yamashita, Ichiro; Samukawa, Seiji

2009-04-01

A high-density, large-area, and uniform two-dimensional (2D) Si-nanodisk array was successfully fabricated using the bio-nano-process, advanced etching techniques, including a treatment using nitrogen trifluoride and hydrogen radical (NF3 treatment) and a damage-free chlorine neutral beam (NB). By using the surface oxide formed by neutral beam oxidation (NBO) for the preparation of a 2D nanometer-sized iron core array as an etching mask, a well-ordered 2D Si-nanodisk array was obtained owing to the dangling bonds of the surface oxide. By changing the NF3 treatment time without changing the quantum effect of each nanodisk, we could control the gap between adjacent nanodisks. A device with two electrodes was fabricated to investigate the electron transport in a 2D Si-nanodisk array. Current fluctuation and time-dependent currents were clearly observed owing to the charging-discharging of the nanodisks adjacent to the current percolation path. The new structure may have great potential for future novel quantum effect devices.

A programmable nanoreplica molding for the fabrication of nanophotonic devices.

PubMed

Liu, Longju; Zhang, Jingxiang; Badshah, Mohsin Ali; Dong, Liang; Li, Jingjing; Kim, Seok-min; Lu, Meng

2016-03-01

The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a single mold. The process utilizes a stretchable mold to produce the desired periodic structure in a photopolymer on glass or plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which resides on the surface of the mold. Direction and magnitude of the force determine the array geometry, including the lattice constant and arrangement. By stretching the mold, 2D arrays with square, rectangular, and triangular lattice structures can be fabricated. As one example, we present a plasmonic crystal device with surface plasmon resonances determined by the force applied during molding. In addition, photonic crystal slabs with different array patterns are fabricated and characterized. This unique process offers the capability of generating various periodic nanostructures rapidly and inexpensively.

A programmable nanoreplica molding for the fabrication of nanophotonic devices

PubMed Central

Liu, Longju; Zhang, Jingxiang; Badshah, Mohsin Ali; Dong, Liang; Li, Jingjing; Kim, Seok-min; Lu, Meng

2016-01-01

The ability to fabricate periodic structures with sub-wavelength features has a great potential for impact on integrated optics, optical sensors, and photovoltaic devices. Here, we report a programmable nanoreplica molding process to fabricate a variety of sub-micrometer periodic patterns using a single mold. The process utilizes a stretchable mold to produce the desired periodic structure in a photopolymer on glass or plastic substrates. During the replica molding process, a uniaxial force is applied to the mold and results in changes of the periodic structure, which resides on the surface of the mold. Direction and magnitude of the force determine the array geometry, including the lattice constant and arrangement. By stretching the mold, 2D arrays with square, rectangular, and triangular lattice structures can be fabricated. As one example, we present a plasmonic crystal device with surface plasmon resonances determined by the force applied during molding. In addition, photonic crystal slabs with different array patterns are fabricated and characterized. This unique process offers the capability of generating various periodic nanostructures rapidly and inexpensively. PMID:26925828

Platinum nanowire microelectrode arrays for neurostimulation applications: Fabrication, characterization, and in-vitro retinal cell stimulation

NASA Astrophysics Data System (ADS)

Whalen, John J., III

Implantable electrical neurostimulating devices are being developed for a number of applications, including artificial vision through retinal stimulation. The epiretinal prosthesis will use a two-dimensional array microelectrodes to address individual cells of the retina. MEMS fabrication processes can produce arrays of microelectrodes with these dimensions, but there are two critical issues that they cannot satisfy. One, the stimulating electrodes are the only part of the implanted electrical device that penetrate through the water impermeable package, and must do so without sacrificing hermeticity. Two, As electrode size decreases, the current density (A cm-2 ) increases, due to increased electrochemical impedance. This reduces the amount of charge that can be safely injected into the tissue. To date, MEMS processing method, cannot produce electrode arrays with good, prolonged hermetic properties. Similarly, MEMS approaches do not account for the increased impedance caused by decreased surface area. For these reasons there is a strong motivation for the development of a water-impermeable, substrate-penetrating electrode array with low electrochemical impedance. This thesis presents a stimulating electrode array fabricated from platinum nanowires using a modified electrochemical template synthesis approach. Nanowires are electrochemically deposited from ammonium hexachloroplatinate solution into lithographically patterned nanoporous anodic alumina templates to produce microarrays of platinum nanowires. The platinum nanowires penetrating through the ceramic aluminum oxide template serve as parallel electrical conduits through the water impermeable, electrically insulating substrate. Electrode impedance can be adjusted by either controlling the nanowire hydrous platinum oxide content or by partially etching the alumina template to expose additional surface area. A stepwise approach to this project was taken. First, the electrochemistry of ammonium hexachloroplatinate solution was characterized, and physical properties of electrodeposited thin films were correlated to deposition conditions used. Second, platinum nanowires were fabricated and their properties characterized, using similar deposition conditions. Third, the feasibility of fabricating platinum nanowire stimulating electrode arrays with a variety of surface structures was demonstrated. Fourth, the enhanced charge transfer characteristics of these structures were demonstrated using electrochemical techniques. Finally, retinal cell stimulation was demonstrated using electrodes from platinum nanowire arrays.

Direct laser writing of topographic features in semiconductor-doped glass

NASA Astrophysics Data System (ADS)

Smuk, Andrei Y.

2000-11-01

Patterning of glass and silica surfaces is important for a number of modern technologies, which depend on these materials for manufacturing of both final products, such as optics, and prototypes for casting and molding. Among the fields that require glass processing on microscopic scale are optics (lenses and arrays, diffractive/holographic elements, waveguides), biotechnology (capillary electrophoresis chips and biochemical libraries) and magnetic media (landing zones for magnetic heads). Currently, standard non-laser techniques for glass surface patterning require complex multi-step processes, such as photolithography. Work carried out at Brown has shown that semiconductor- doped glasses (SDG) allow a single-step patterning process using low power continuous-wave visible lasers. SDG are composite materials, which consist of semiconductor crystallites embedded into glass matrix. In this study, borosilicate glasses doped with CdSxSe1-x nanocrystals were used. Exposure of these materials to a low-power above- the-energy gap laser beam leads to local softening, and subsequent expansion and rapid solidification of the exposed volume, resulting in a nearly spherical topographic feature on the surface. The effects of the incident power, beam configuration, and the exposure time on the formation and final parameters of the microlens were studied. Based on the numerical simulation of the temperature distribution produced by the absorbed Gaussian beam, and the ideas of viscous flow at the temperatures around the glass transition point, a model of lens formation is suggested. The light intensity distribution in the near-field of the growing lens is shown to have a significant effect on the final lens height. Fabrication of dense arrays of microlenses is shown, and the thermal and structural interactions between the neighboring lenses were also studied. Two-dimensional continuous-profile topographic features are achieved by exposure of the moving substrates to the writing beam. By controlling the translation speed and the position of the sample, predefined extended structures, such as diffractive optical elements (blazed gratings, Dammann generators, Fresnel zone plates) can be produced with resolution of ~1μm. Below-the-surface patterning is achieved due to a selective etching of laser-written structures in hydrofluoric acid. Similar selective etching technique was developed for undoped borosilicate glasses by exposure to intense visible and UV radiation.

Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto

DOEpatents

Bond, Tiziana C.; Miles, Robin; Davidson, James C.; Liu, Gang Logan

2014-07-22

Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.

Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto

DOEpatents

Bond, Tiziana C.; Miles, Robin; Davidson, James C.; Liu, Gang Logan

2015-07-14

Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.

Nanoscale array structures suitable for surface enhanced raman scattering and methods related thereto

DOEpatents

Bond, Tiziana C; Miles, Robin; Davidson, James; Liu, Gang Logan

2015-11-03

Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.

Fabrication and evaluation of an improved polymer-based cochlear electrode array for atraumatic insertion.

PubMed

Gwon, Tae Mok; Min, Kyou Sik; Kim, Jin Ho; Oh, Seung Ha; Lee, Ho Sun; Park, Min-Hyun; Kim, Sung June

2015-04-01

An atraumatic cochlear electrode array has become indispensable to high-performance cochlear implants such as electric acoustic stimulation (EAS), wherein the preservation of residual hearing is significant. For an atraumatic implantation, we propose and demonstrate a new improved design of a cochlear electrode array based on liquid crystal polymer (LCP), which can be fabricated by precise batch processes and a thermal lamination process, in contrast to conventional wire-based cochlear electrode arrays. Using a thin-film process of LCP-film-mounted silicon wafer and thermal press lamination, we devise a multi-layered structure with variable layers of LCP films to achieve a sufficient degree of basal rigidity and a flexible tip. A peripheral blind via and self-aligned silicone elastomer molding process can reduce the width of the array. Measuring the insertion and extraction forces in a human scala tympani model, we investigate five human temporal bone insertion trials and record electrically evoked auditory brainstem responses (EABR) acutely in a guinea pig model. The diameters of the finalized electrode arrays are 0.3 mm (tip) and 0.75 mm (base). The insertion force with a displacement of 8 mm from a round window and the maximum extraction force are 2.4 mN and 34.0 mN, respectively. The electrode arrays can be inserted from 360° to 630° without trauma at the basal turn. The EABR data confirm the efficacy of the array. A new design of LCP-based cochlear electrode array for atraumatic implantation is fabricated. Verification indicates that foretells the development of an atraumatic cochlear electrode array and clinical implant.

Array servo scanning micro EDM of 3D micro cavities

NASA Astrophysics Data System (ADS)

Tong, Hao; Li, Yong; Yi, Futing

2011-05-01

Micro electro discharge machining (Micro EDM) is a non-traditional processing technology with the special advantages of low set-up cost and few cutting force in machining any conductive materials regardless of their hardness. As well known, die-sinking EDM is unsuitable for machining the complex 3D micro cavity less than 1mm due to the high-priced fabrication of 3D microelectrode itself and its serous wear during EDM process. In our former study, a servo scanning 3D micro-EDM (3D SSMEDM) method was put forward, and our experiments showed it was available to fabricate complex 3D micro-cavities. In this study, in order to improve machining efficiency and consistency accuracy for array 3D micro-cavities, an array-servo-scanning 3D micro EDM (3D ASSMEDM) method is presented considering the complementary advantages of the 3D SSMEDM and the array micro electrodes with simple cross-section. During 3D ASSMEDM process, the array cavities designed by CAD / CAM system can be batch-manufactured by servo scanning layer by layer using array-rod-like micro tool electrodes, and the axial wear of the array electrodes is compensated in real time by keeping discharge gap. To verify the effectiveness of the 3D ASSMEDM, the array-triangle-micro cavities (side length 630 μm) are batch-manufactured on P-doped silicon by applying the array-micro-electrodes with square-cross-section fabricated by LIGA process. Our exploratory experiment shows that the 3D ASSMEDM provides a feasible approach for the batch-manufacture of 3D array-micro-cavities of conductive materials.

Lithographically patterned electrodeposition of gold, silver, and nickel nanoring arrays with widely tunable near-infrared plasmonic resonances.

PubMed

Halpern, Aaron R; Corn, Robert M

2013-02-26

A novel low-cost nanoring array fabrication method that combines the process of lithographically patterned nanoscale electrodeposition (LPNE) with colloidal lithography is described. Nanoring array fabrication was accomplished in three steps: (i) a thin (70 nm) sacrificial nickel or silver film was first vapor-deposited onto a plasma-etched packed colloidal monolayer; (ii) the polymer colloids were removed from the surface, a thin film of positive photoresist was applied, and a backside exposure of the photoresist was used to create a nanohole electrode array; (iii) this array of nanoscale cylindrical electrodes was then used for the electrodeposition of gold, silver, or nickel nanorings. Removal of the photoresist and sacrificial metal film yielded a nanoring array in which all of the nanoring dimensions were set independently: the inter-ring spacing was fixed by the colloidal radius, the radius of the nanorings was controlled by the plasma etching process, and the width of the nanorings was controlled by the electrodeposition process. A combination of scanning electron microscopy (SEM) measurements and Fourier transform near-infrared (FT-NIR) absorption spectroscopy were used to characterize the nanoring arrays. Nanoring arrays with radii from 200 to 400 nm exhibited a single strong NIR plasmonic resonance with an absorption maximum wavelength that varied linearly from 1.25 to 3.33 μm as predicted by a simple standing wave model linear antenna theory. This simple yet versatile nanoring array fabrication method was also used to electrodeposit concentric double gold nanoring arrays that exhibited multiple NIR plasmonic resonances.

Automated Array Assembly, Phase 2

NASA Technical Reports Server (NTRS)

Carbajal, B. G.

1979-01-01

The Automated Array Assembly Task, Phase 2 of the Low Cost Silicon Solar Array Project is a process development task. The contract provides for the fabrication of modules from large area tandem junction cells (TJC). During this quarter, effort was focused on the design of a large area, approximately 36 sq cm, TJC and process verification runs. The large area TJC design was optimized for minimum I squared R power losses. In the TJM activity, the cell-module interfaces were defined, module substrates were formed and heat treated and clad metal interconnect strips were fabricated.

Enhanced performance of a structured cyclo olefin copolymer-based amorphous silicon solar cell

NASA Astrophysics Data System (ADS)

Zhan, Xinghua; Chen, Fei; Gao, Mengyu; Tie, Shengnian; Gao, Wei

2017-07-01

The submicron array was fabricated onto a cyclo olefin copolymer (COC) film by a hot embossing method. An amorphous silicon p-i-n junction and transparent conductive layers were then deposited onto it through a plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering. The efficiency of the fabricated COC-based solar cell was measured and the result demonstrated 18.6% increase of the solar cell efficiency when compared to the sample without array structure. The imprinted polymer solar cells with submicron array indeed increase their efficiency.

The Constellation-X Focal Plane Microcalorimeter Array: An NTD-Germanium Solution

NASA Technical Reports Server (NTRS)

Beeman, J.; Silver, E.; Bandler, S.; Schnopper, H.; Murray, S.; Madden, N.; Landis, D.; Haller, E. E.; Barbera, M.

2001-01-01

The hallmarks of Neutron Transmutation Doped (NTD) germanium cryogenic thermistors include high reliability, reproducibility, and long term stability of bulk carrier transport properties. Using micro-machined NTD Ge thermistors with integral 'flying' leads, we can now fabricate two-dimensional arrays that are built up from a series of stacked linear arrays. We believe that this modular approach of building, assembling, and perhaps replacing individual modules of detectors is essential to the successful fabrication and testing of large multi-element instruments. Details of construction are presented.

Fine-tunable plasma nano-machining for fabrication of 3D hollow nanostructures: SERS application

NASA Astrophysics Data System (ADS)

Mehrvar, L.; Hajihoseini, H.; Mahmoodi, H.; Tavassoli, S. H.; Fathipour, M.; Mohseni, S. M.

2017-08-01

Novel processing sequences for the fabrication of artificial nanostructures are in high demand for various applications. In this paper, we report on a fine-tunable nano-machining technique for the fabrication of 3D hollow nanostructures. This technique originates from redeposition effects occurring during Ar dry etching of nano-patterns. Different geometries of honeycomb, double ring, nanotube, cone and crescent arrays have been successfully fabricated from various metals such as Au, Ag, Pt and Ti. The geometrical parameters of the 3D hollow nanostructures can be straightforwardly controlled by tuning the discharge plasma pressure and power. The structure and morphology of nanostructures are probed using atomic force microscopy (AFM), scanning electron microscopy (SEM), optical emission spectroscopy (OES) and energy dispersive x-ray spectroscopy (EDS). Finally, a Ag nanotube array was assayed for application in surface enhanced Raman spectroscopy (SERS), resulting in an enhancement factor (EF) of 5.5 × 105, as an experimental validity proof consistent with the presented simulation framework. Furthermore, it was found that the theoretical EF value for the honeycomb array is in the order of 107, a hundred times greater than that found in nanotube array.

Lowering data retention voltage in static random access memory array by post fabrication self-improvement of cell stability by multiple stress application

NASA Astrophysics Data System (ADS)

Mizutani, Tomoko; Takeuchi, Kiyoshi; Saraya, Takuya; Kobayashi, Masaharu; Hiramoto, Toshiro

2018-04-01

We propose a new version of the post fabrication static random access memory (SRAM) self-improvement technique, which utilizes multiple stress application. It is demonstrated that, using a device matrix array (DMA) test element group (TEG) with intrinsic channel fully depleted (FD) silicon-on-thin-buried-oxide (SOTB) six-transistor (6T) SRAM cells fabricated by the 65 nm technology, the lowering of data retention voltage (DRV) is more effectively achieved than using the previously proposed single stress technique.

High Aspect Ratio Semiconductor Heterojunction Solar Cells

DOE Office of Scientific and Technical Information (OSTI.GOV)

Redwing, Joan; Mallouk, Tom; Mayer, Theresa

2013-05-17

The project focused on the development of high aspect ratio silicon heterojunction (HARSH) solar cells. The solar cells developed in this study consisted of high density vertical arrays of radial junction silicon microwires/pillars formed on Si substrates. Prior studies have demonstrated that vertical Si wire/pillar arrays enable reduced reflectivity and improved light trapping characteristics compared to planar solar cells. In addition, the radial junction structure offers the possibility of increased carrier collection in solar cells fabricated using material with short carrier diffusion lengths. However, the high junction and surface area of radial junction Si wire/pillar array devices can be problematicmore » and lead to increased diode leakage and enhanced surface recombination. This study investigated the use of amorphous hydrogenated Si in the form of a heterojunction-intrinsic-thin layer (HIT) structure as a junction formation method for these devices. The HIT layer structure has widely been employed to reduce surface recombination in planar crystalline Si solar cells. Consequently, it was anticipated that it would also provide significant benefits to the performance of radial junction Si wire/pillar array devices. The overall goals of the project were to demonstrate a HARSH cell with a HIT-type structure in the radial junction Si wire/pillar array configuration and to develop potentially low cost pathways to fabricate these devices. Our studies demonstrated that the HIT structure lead to significant improvements in the open circuit voltage (V oc>0.5) of radial junction Si pillar array devices compared to devices fabricated using junctions formed by thermal diffusion or low pressure chemical vapor deposition (LPCVD). In addition, our work experimentally demonstrated that the radial junction structure lead to improvements in efficiency compared to comparable planar devices for devices fabricated using heavily doped Si that had reduced carrier diffusion lengths. Furthermore, we made significant advances in employing the bottom-up vapor-liquid-solid (VLS) growth technique for the fabrication of the Si wire arrays. Our work elucidated the effects of growth conditions and substrate pattern geometry on the growth of large area Si microwire arrays grown with SiCl4. In addition, we also developed a process to grow p-type Si nanowire arrays using aluminum as the catalyst metal instead of gold. Finally, our work demonstrated the feasibility of growing vertical arrays of Si wires on non-crystalline glass substrates using polycrystalline Si template layers. The accomplishments demonstrated in this project will pave the way for future advances in radial junction wire array solar cells.« less

Isotropic differential phase contrast microscopy for quantitative phase bio-imaging.

PubMed

Chen, Hsi-Hsun; Lin, Yu-Zi; Luo, Yuan

2018-05-16

Quantitative phase imaging (QPI) has been investigated to retrieve optical phase information of an object and applied to biological microscopy and related medical studies. In recent examples, differential phase contrast (DPC) microscopy can recover phase image of thin sample under multi-axis intensity measurements in wide-field scheme. Unlike conventional DPC, based on theoretical approach under partially coherent condition, we propose a new method to achieve isotropic differential phase contrast (iDPC) with high accuracy and stability for phase recovery in simple and high-speed fashion. The iDPC is simply implemented with a partially coherent microscopy and a programmable thin-film transistor (TFT) shield to digitally modulate structured illumination patterns for QPI. In this article, simulation results show consistency of our theoretical approach for iDPC under partial coherence. In addition, we further demonstrate experiments of quantitative phase images of a standard micro-lens array, as well as label-free live human cell samples. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Super-resolution imaging of multiple cells by optimized flat-field epi-illumination

NASA Astrophysics Data System (ADS)

Douglass, Kyle M.; Sieben, Christian; Archetti, Anna; Lambert, Ambroise; Manley, Suliana

2016-11-01

Biological processes are inherently multi-scale, and supramolecular complexes at the nanoscale determine changes at the cellular scale and beyond. Single-molecule localization microscopy (SMLM) techniques have been established as important tools for studying cellular features with resolutions of the order of around 10 nm. However, in their current form these modalities are limited by a highly constrained field of view (FOV) and field-dependent image resolution. Here, we develop a low-cost microlens array (MLA)-based epi-illumination system—flat illumination for field-independent imaging (FIFI)—that can efficiently and homogeneously perform simultaneous imaging of multiple cells with nanoscale resolution. The optical principle of FIFI, which is an extension of the Köhler integrator, is further elucidated and modelled with a new, free simulation package. We demonstrate FIFI's capabilities by imaging multiple COS-7 and bacteria cells in 100 × 100 μm2 SMLM images—more than quadrupling the size of a typical FOV and producing near-gigapixel-sized images of uniformly high quality.

High-content analysis of single cells directly assembled on CMOS sensor based on color imaging.

PubMed

Tanaka, Tsuyoshi; Saeki, Tatsuya; Sunaga, Yoshihiko; Matsunaga, Tadashi

2010-12-15

A complementary metal oxide semiconductor (CMOS) image sensor was applied to high-content analysis of single cells which were assembled closely or directly onto the CMOS sensor surface. The direct assembling of cell groups on CMOS sensor surface allows large-field (6.66 mm×5.32 mm in entire active area of CMOS sensor) imaging within a second. Trypan blue-stained and non-stained cells in the same field area on the CMOS sensor were successfully distinguished as white- and blue-colored images under white LED light irradiation. Furthermore, the chemiluminescent signals of each cell were successfully visualized as blue-colored images on CMOS sensor only when HeLa cells were placed directly on the micro-lens array of the CMOS sensor. Our proposed approach will be a promising technique for real-time and high-content analysis of single cells in a large-field area based on color imaging. Copyright © 2010 Elsevier B.V. All rights reserved.

Tunable liquid microlens arrays in electrode-less configuration and their accurate characterization by interference microscopy.

PubMed

Miccio, L; Finizio, A; Grilli, S; Vespini, V; Paturzo, M; De Nicola, S; Ferraro, Pietro

2009-02-16

A special class of tunable liquid microlenses is presented here. The microlenses are generated by an electrowetting effect under an electrode-less configuration and they exhibit two different regimes that are named here as separated lens regime (SLR) and wave-like lens regime (WLR). The lens effect is induced by the pyroelectricity of polar dielectric crystals, as was proved in principle in a previous work by the same authors (S. Grilli et al., Opt. Express 16, 8084, 2008). Compared to that work, the improvements to the experimental set-up and procedure allow to reveal the two lens regimes which exhibit different optical properties. A digital holography technique is used to reconstruct the transmitted wavefront during focusing and a focal length variation in the millimetre range is observed. The tunability of such microlenses could be of great interest to the field of micro-optics thanks to the possibility to achieve focus tuning without moving parts and thus favouring the miniaturization of the optical systems.

High-speed transport-of-intensity phase microscopy with an electrically tunable lens.

PubMed

Zuo, Chao; Chen, Qian; Qu, Weijuan; Asundi, Anand

2013-10-07

We present a high-speed transport-of-intensity equation (TIE) quantitative phase microscopy technique, named TL-TIE, by combining an electrically tunable lens with a conventional transmission microscope. This permits the specimen at different focus position to be imaged in rapid succession, with constant magnification and no physically moving parts. The simplified image stack collection significantly reduces the acquisition time, allows for the diffraction-limited through-focus intensity stack collection at 15 frames per second, making dynamic TIE phase imaging possible. The technique is demonstrated by profiling of microlens array using optimal frequency selection scheme, and time-lapse imaging of live breast cancer cells by inversion the defocused phase optical transfer function to correct the phase blurring in traditional TIE. Experimental results illustrate its outstanding capability of the technique for quantitative phase imaging, through a simple, non-interferometric, high-speed, high-resolution, and unwrapping-free approach with prosperous applications in micro-optics, life sciences and bio-photonics.

Quantitative phase microscopy via optimized inversion of the phase optical transfer function.

PubMed

Jenkins, Micah H; Gaylord, Thomas K

2015-10-01

Although the field of quantitative phase imaging (QPI) has wide-ranging biomedical applicability, many QPI methods are not well-suited for such applications due to their reliance on coherent illumination and specialized hardware. By contrast, methods utilizing partially coherent illumination have the potential to promote the widespread adoption of QPI due to their compatibility with microscopy, which is ubiquitous in the biomedical community. Described herein is a new defocus-based reconstruction method that utilizes a small number of efficiently sampled micrographs to optimally invert the partially coherent phase optical transfer function under assumptions of weak absorption and slowly varying phase. Simulation results are provided that compare the performance of this method with similar algorithms and demonstrate compatibility with large phase objects. The accuracy of the method is validated experimentally using a microlens array as a test phase object. Lastly, time-lapse images of live adherent cells are obtained with an off-the-shelf microscope, thus demonstrating the new method's potential for extending QPI capability widely in the biomedical community.

Two-dimensional interferometric Rayleigh scattering velocimetry using multibeam probe laser

NASA Astrophysics Data System (ADS)

Sheng, Wang; Jin-Hai, Si; Jun, Shao; Zhi-yun, Hu; Jing-feng, Ye; Jing-Ru, Liu

2017-11-01

In order to achieve the two-dimensional (2-D) velocity measurement of a flow field at extreme condition, a 2-D interferometric Rayleigh scattering (IRS) velocimetry using a multibeam probe laser was developed. The method using a multibeam probe laser can record the reference interference signal and the flow interference signal simultaneously. What is more, this method can solve the problem of signal overlap using the laser sheet detection method. The 2-D IRS measurement system was set up with a multibeam probe laser, aspherical lens collection optics, and a solid Fabry-Perot etalon. A multibeam probe laser with 0.5-mm intervals was formed by collimating a laser sheet passing through a cylindrical microlens arrays. The aspherical lens was used to enhance the intensity of the Rayleigh scattering signal. The 2-D velocity field results of a Mach 1.5 air flow were obtained. The velocity in the flow center is about 450 m/s. The reconstructed results fit well with the characteristic of flow, which indicate the validity of this technique.

Rich variety of substrates for surface enhanced Raman spectroscopy

NASA Astrophysics Data System (ADS)

Nguyen, Bich Ha; Hieu Nguyen, Van; Nhung Tran, Hong

2016-09-01

The efficiency of the application of surface enhanced Raman spectroscopy (SERS) technique to each specified purpose significantly depends on the choice of the SERS substrate with an appropriate structure as well as on its performance. Until the present time a rich variety of SERS substrates was fabricated. They can be classified according to their structures. The present work is a review of main types of SERS substrates for using in the trace analysis application. They can be classified into 4 groups: (1) Substrates using gold nanoparticles (AuNPs) with spherical shape such as colloidal AuNPs, AuNPs fabricated by pulsed laser deposition, by sputtering or by capillary force assembly (CFA), substrates fabricated by electrospinning technique, substrates using metallic nanoparticle arrays fabricated by electron beam lithography combined with CFA method, substrates using silver nanoparticle (AgNP) arrays grain by chemical seeded method, substrates with tunable surface plasmon resonance, substrates based on precies subnanometer plasmonic junctions within AuNP assemblies, substrates fabricated by simultaneously immobilizing both AuNPs and AgNPs on the same glass sides etc. (2) Substrates using nanostructures with non-spherical shapes such as gold nanowire (NW), or highly anisotropic nickel NW together with large area, free-standing carpets, substrates with obviously angular, quasi-vertically aligned cuboid-shaped TiO2 NW arrays decorated with AgNPs, substrates using gold nanoprism monolayer films, substrates using silver nanocube dimmers or monodisperse close-packed gold nanotriangle monolayers. (3) Substrates using multiparticle complex nanostructure such as nanoparticle cluster arrays, gold nanoflowers and nanodendrites. (4) Flexible substrate such as paper-based swab with gold nanorods, adhesive polymer tapes fabricated by inkjet printing method and flexible and adhesive SERS tapes fabricated by decorating AuNPs via the conventional drop-dry method.

Manufacturing PDMS micro lens array using spin coating under a multiphase system

NASA Astrophysics Data System (ADS)

Sun, Rongrong; Yang, Hanry; Rock, D. Mitchell; Danaei, Roozbeh; Panat, Rahul; Kessler, Michael R.; Li, Lei

2017-05-01

The development of micro lens arrays has garnered much interest due to increased demand of miniaturized systems. Traditional methods for manufacturing micro lens arrays have several shortcomings. For example, they require expensive facilities and long lead time, and traditional lens materials (i.e. glass) are typically heavy, costly and difficult to manufacture. In this paper, we explore a method for manufacturing a polydimethylsiloxane (PDMS) micro lens array using a simple spin coating technique. The micro lens array, formed under an interfacial tension dominated system, and the influence of material properties and process parameters on the fabricated lens shape are examined. The lenses fabricated using this method show comparable optical properties—including surface finish and image quality—with a reduced cost and manufacturing lead time.

Development of components for an S-band phased array antenna subsystem

NASA Technical Reports Server (NTRS)

1975-01-01

The system requirements, module test data, and S-band phased array subsystem test data are discussed. Of the two approaches to achieving antenna gain (mechanically steered reflector or electronically steered phased array), the phased array approach offers the greatest simplicity and lowest cost (size, weight, power, and dollars) for this medium gain. A competitive system design is described as well as hardware evaluation which will lead to timely availability of this technology for implementing such a system. The objectives of the study were: to fabricate and test six engineering model transmit/receive microelectronics modules; to design, fabricate, and test one dc and logic multilayer manifold; and to integrate and test an S-band phased array antenna subsystem composed of antenna elements, seven T/R modules, RF manifolds and dc manifold.

Method of fabricating a PbS-PbSe IR detector array

NASA Technical Reports Server (NTRS)

Barrett, John R. (Inventor)

1987-01-01

A silicon wafer is provided which does not employ individually bonded leads between the IR sensitive elements and the input stages of multiplexers. The wafer is first coated with lead selenide in a first detector array area and is thereafter coated with lead sulfide within a second detector array area. The described steps result in the direct chemical deposition of lead selenide and lead sulfide upon the silicon wafer to eliminate individual wire bonding, bumping, flip chiping, planar interconnecting methods of connecting detector array elements to silicon chip circuitry, e.g., multiplexers, to enable easy fabrication of very long arrays. The electrode structure employed, produces an increase in the electrical field gradient between the electrodes for a given volume of detector material, relative to conventional electrode configurations.

Fabrication of Transition Edge Sensor Microcalorimeters for X-Ray Focal Planes

NASA Technical Reports Server (NTRS)

Chervenak, James A.; Adams, Joseph S.; Audley, Heather; Bandler, Simon R.; Betancourt-Martinez, Gabriele; Eckart, Megan E.; Finkbeiner, Fred M.; Kelley, Richard L.; Kilbourne, Caroline; Lee, Sang Jun;

Controllable fabrication of ultrafine oblique organic nanowire arrays and their application in energy harvesting

NASA Astrophysics Data System (ADS)

Zhang, Lu; Cheng, Li; Bai, Suo; Su, Chen; Chen, Xiaobo; Qin, Yong

2015-01-01

Ultrafine organic nanowire arrays (ONWAs) with a controlled direction were successfully fabricated by a novel one-step Faraday cage assisted plasma etching method. The mechanism of formation of nanowire arrays is proposed; the obliquity and aspect ratio can be accurately controlled from approximately 0° to 90° via adjusting the angle of the sample and the etching time, respectively. In addition, the ONWAs were further utilized to improve the output of the triboelectric nanogenerator (TENG). Compared with the output of TENG composed of vertical ONWAs, the open-circuit voltage, short-circuit current and inductive charges were improved by 73%, 150% and 98%, respectively. This research provides a convenient and practical method to fabricate ONWAs with various obliquities on different materials, which can be used for energy harvesting.

Controllable fabrication of ultrafine oblique organic nanowire arrays and their application in energy harvesting.

PubMed

Zhang, Lu; Cheng, Li; Bai, Suo; Su, Chen; Chen, Xiaobo; Qin, Yong

2015-01-28

Ultrafine organic nanowire arrays (ONWAs) with a controlled direction were successfully fabricated by a novel one-step Faraday cage assisted plasma etching method. The mechanism of formation of nanowire arrays is proposed; the obliquity and aspect ratio can be accurately controlled from approximately 0° to 90° via adjusting the angle of the sample and the etching time, respectively. In addition, the ONWAs were further utilized to improve the output of the triboelectric nanogenerator (TENG). Compared with the output of TENG composed of vertical ONWAs, the open-circuit voltage, short-circuit current and inductive charges were improved by 73%, 150% and 98%, respectively. This research provides a convenient and practical method to fabricate ONWAs with various obliquities on different materials, which can be used for energy harvesting.

Silver nanowire/polymer composite soft conductive film fabricated by large-area compatible coating for flexible pressure sensor array

NASA Astrophysics Data System (ADS)

Chen, Sujie; Li, Siying; Peng, Sai; Huang, Yukun; Zhao, Jiaqing; Tang, Wei; Guo, Xiaojun

2018-01-01

Soft conductive films composed of a silver nanowire (AgNW) network, a neutral-pH PEDOT:PSS over-coating layer and a polydimethylsiloxane (PDMS) elastomer substrate are fabricated by large area compatible coating processes. The neutral-pH PEDOT:PSS layer is shown to be able to significantly improve the conductivity, stretchability and air stability of the conductive films. The soft conductive films are patterned using a simple maskless patterning approach to fabricate an 8 × 8 flexible pressure sensor array. It is shown that such soft conductive films can help to improve the sensitivity and reduce the signal crosstalk over the pressure sensor array. Project supported by the Science and Technology Commission of Shanghai Municipality (No. 16JC1400603).

Preparation of superhydrophobic copper surface by a novel silk-screen printing aided electrochemical machining method

NASA Astrophysics Data System (ADS)

Yan, X. Y.; Chen, G. X.; Liu, J. W.

2018-03-01

A kind of superhydrophobic copper surface with micro-nanocomposite structure has been successfully fabricated by employing a silk-screen printing aided electrochemical machining method. At first silk-screen printing technology has been used to form a column point array mask, and then the microcolumn array would be fabricated by electrochemical machining (ECM) effect. In this study, the drop contact angles have been studied and scanning electron microscopy (SEM) has been used to study the surface characteristic of the workpiece. The experiment results show that the micro-nanocomposite structure with cylindrical array can be successfully fabricated on the metal surface. And the maximum contact angle is 151° when the fluoroalkylsilane ethanol solution was used to modify the machined surface in this study.

Resonance spectra of diabolo optical antenna arrays

DOE Office of Scientific and Technical Information (OSTI.GOV)

Guo, Hong; Guo, Junpeng, E-mail: guoj@uah.edu; Simpkins, Blake

A complete set of diabolo optical antenna arrays with different waist widths and periods was fabricated on a sapphire substrate by using a standard e-beam lithography and lift-off process. Fabricated diabolo optical antenna arrays were characterized by measuring the transmittance and reflectance with a microscope-coupled FTIR spectrometer. It was found experimentally that reducing the waist width significantly shifts the resonance to longer wavelength and narrowing the waist of the antennas is more effective than increasing the period of the array for tuning the resonance wavelength. Also it is found that the magnetic field enhancement near the antenna waist is correlatedmore » to the shift of the resonance wavelength.« less

Field emission from in situ-grown vertically aligned SnO2 nanowire arrays

PubMed Central

2012-01-01

Vertically aligned SnO2 nanowire arrays have been in situ fabricated on a silicon substrate via thermal evaporation method in the presence of a Pt catalyst. The field emission properties of the SnO2 nanowire arrays have been investigated. Low turn-on fields of 1.6 to 2.8 V/μm were obtained at anode-cathode separations of 100 to 200 μm. The current density fluctuation was lower than 5% during a 120-min stability test measured at a fixed applied electric field of 5 V/μm. The favorable field-emission performance indicates that the fabricated SnO2 nanowire arrays are promising candidates as field emitters. PMID:22330800

A novel optical detector concept for dedicated and multi-modality in vivo small animal imaging

NASA Astrophysics Data System (ADS)

Peter, Jörg; Schulz, Ralf B.; Unholtz, Daniel; Semmler, Wolfhard

2007-07-01

An optical detector suitable for inclusion in tomographic arrangements for non-contact in vivo bioluminescence and fluorescence imaging applications is proposed. It consists of a microlens array (MLA) intended for field-of-view definition, a large-field complementary metal-oxide-semiconductor (CMOS) chip for light detection, a septum mask for cross-talk suppression, and an exchangeable filter to block excitation light. Prototype detector units with sensitive areas of 2.5 cm x 5 cm each were assembled. The CMOS sensor constitutes a 512 x 1024 photodiode matrix at 48 μm pixel pitch. Refractive MLAs with plano-convex lenses of 480 μm in diameter and pitch were selected resulting in a 55 x 105 lens matrix. The CMOS sensor is aligned on the focal plane of the MLA at 2.15mm distance. To separate individual microlens images an opaque multi-bore septum mask of 2.1mm in thickness and bore diameters of 400 μm at 480 μm pitch, aligned with the lens pattern, is placed between MLA and CMOS. Intrinsic spatial detector resolution and sensitivity was evaluated experimentally as a function of detector-object distance. Due to its small overall dimensions such detectors can be favorably packed for tomographic imaging (optical diffusion tomography, ODT) yielding complete 2 π field-of-view coverage. We also present a design study of a device intended to simultaneously image positron labeled substrates (positron emission tomography, PET) and optical molecular probes in small animals such as mice and rats. It consists of a cylindrical allocation of optical detector units which form an inner detector ring while PET detector blocks are mounted in radial extension, those gaining complementary information in a single, intrinsically coregistered experimental data acquisition study. Finally, in a second design study we propose a method for integrated optical and magnetic resonance imaging (MRI) which yields in vivo functional/molecular information that is intrinsically registered with the anatomy of the image object.

Polymer-based sensor array for phytochemical detection

NASA Astrophysics Data System (ADS)

Weerakoon, Kanchana A.; Hiremath, Nitilaksha; Chin, Bryan A.

2012-05-01

Monitoring for the appearance of volatile organic compounds emitted by plants which correspond to time of first insect attack can be used to detect the early stages of insect infestation. This paper reports a chemical sensor array consisting of polymer based chemiresistor sensors that could detect insect infestation effectively. The sensor array consists of sensors with micro electronically fabricated interdigitated electrodes, and twelve different types of electro active polymer layers. The sensor array was cheap, easy to fabricate, and could be used easily in agricultural fields. The polymer array was found to be sensitive to a variety of volatile organic compounds emitted by plants including γ-terpinene α-pinene, pcymene, farnesene, limonene and cis-hexenyl acetate. The sensor array was not only able to detect but also distinguish between these compounds. The twelve sensors produced a resistance change for each of the analytes detected, and each of these responses together produced a unique fingerprint, enabling to distinguish among these chemicals.

Nine-channel wavelength tunable single mode laser array based on slots.

PubMed

Guo, Wei-Hua; Lu, Qiaoyin; Nawrocka, Marta; Abdullaev, Azat; O'Callaghan, James; Donegan, John F

2013-04-22

A 9-channel wavelength tunable single-mode laser array based on slots is presented. The fabricated laser array demonstrated a threshold current in a range of 19~21 mA with the SOA unbiased at 20°C under continuous wave condition. Stable single mode performances have been observed with side-mode suppression-ratio (SMSR) > 50 dB. The output power higher than 37 mW was obtained at the SOA injected current of 70 mA for all the 9 channels within the laser array. A wavelength quasi-continuous tuning range of about 27 nm has been achieved for the laser array with the temperature variations from 10°C to 45°C. This array platform is of a single growth and monolithically integrable. It can be easily fabricated by standard photolithography. In addition, it potentially removes the yield problem due to the uncertainty of the facet cleaving.

Structure and dye-sensitized solar cell application of TiO2 nanotube arrays fabricated by the anodic oxidation method

NASA Astrophysics Data System (ADS)

Ok, Seon-Yeong; Cho, Kwon-Koo; Kim, Ki-Won; Ryu, Kwang-Sun

2010-05-01

Well-ordered TiO2 nanotube arrays were fabricated by the potentiostatic anodic oxidation method using pure Ti foil as a working electrode and ethylene glycol solution as an electrolyte with the small addition of NH4F and H2O. The influence of anodization temperature and time on the morphology and formation of TiO2 nanotube arrays was examined. The TiO2 nanotube arrays were applied as a photoelectrode to dye-sensitized solar cells. Regardless of anodizing temperature and time, the average diameter and wall thickness of TiO2 nanotube arrays show a similar value, whereas the length increases with decreasing reaction temperature. The conversion efficiency is very low, which is due to a morphology breaking of the TiO2 nanotube arrays in the manufacturing process of a photoelectrode.

Hemispherical array of sensors with contractively wrapped polymer petals for flow sensing

NASA Astrophysics Data System (ADS)

Kanhere, Elgar; Wang, Nan; Kottapalli, Ajay Giri Prakash; Miao, Jianmin; Triantafyllou, Michael

2017-11-01

Hemispherical arrays have inherent advantages that allow simultaneous detection of flow speed and direction due to their shape. Though MEMS technology has progressed leaps and bounds, fabrication of array of sensors on a hemispherical surface is still a challenge. In this work, a novel approach of constructing hemispherical array is presented which employs a technique of contractively wrapping a hemispherical surface with flexible liquid crystal polymer petals. This approach also leverages the offerings from rapid prototyping technology and established standard MEMS fabrication processes. Hemispherical arrays of piezoresistive sensors are constructed with two types of petal wrappings, 4-petals and 8-petals, on a dome. The flow sensing and direction detection abilities of the dome are evaluated through experiments in wind tunnel. Experimental results demonstrate that a dome equipped with a dense array of sensors can provide information pertaining to the stimulus, through visualization of output profile over the entire surface.

Surface potential on gold nanodisc arrays fabricated on silicon under light irradiation

NASA Astrophysics Data System (ADS)

Ezaki, Tomotarou; Matsutani, Akihiro; Nishioka, Kunio; Shoji, Dai; Sato, Mina; Okamoto, Takayuki; Isobe, Toshihiro; Nakajima, Akira; Matsushita, Sachiko

2018-06-01

This paper proposes Kelvin probe force microscopy (KFM) as a new measurement method of plasmon phenomenon. The surface potential of two arrays, namely, a monomeric array and a tetrameric array, of gold nanodiscs (600 nm diameter) on a silicon substrate fabricated by electron beam lithography was investigated by KFM with the view point of irradiation light wavelength change. In terms of the value of the surface potential, contrasting behaviour, a negative shift in the monomeric disc array and a positive shift in the tetrameric disc array, was observed by light irradiation. This interesting behaviour is thought to be related to a difference in localised plasmons caused by the disc arrangement and was investigated from various viewpoints, including Rayleigh anomalies. Finally, this paper reveals that KFM is powerful not only to investigate the plasmonic behaviour but also to predict the electron transportation.

Magnetic characteristics of CoPd and FePd antidot arrays on nanoperforated Al2O3 templates

NASA Astrophysics Data System (ADS)

Maximenko, A.; Fedotova, J.; Marszałek, M.; Zarzycki, A.; Zabila, Y.

2016-02-01

Hard magnetic antidot arrays show promising results in context of designing of percolated perpendicular media. In this work the technology of magnetic FePd and CoPd antidot arrays fabrication is presented and correlation between surface morphology, structure and magnetic properties is discussed. CoPd and FePd antidot arrays were fabricated by deposition of Co/Pd and Fe/Pd multilayers (MLs) on porous anodic aluminum oxide templates with bowl-shape cell structure with inclined intercellular regions. FePd ordered L10 structure was obtained by successive vacuum annealing at elevated temperatures (530 °C) and confirmed by XRD analysis. Systematic analysis of magnetization curves evidenced perpendicular magnetic anisotropy of CoPd antidot arrays, while FePd antidot arrays revealed isotropic magnetic anisotropy with increased out-of-plane magnetic contribution. MFM images of antidots showed more complicated contrast, with alternating magnetic dots oriented parallel and antiparallel to tip magnetization moment.

Simultaneous fabrication of a microcavity absorber-emitter on a Ni-W alloy film

NASA Astrophysics Data System (ADS)

Nashun; Kagimoto, Masahiro; Iwami, Kentaro; Umeda, Norihiro

2017-10-01

A process for the simultaneous fabrication of microcavity structures on both sides of a film was proposed and demonstrated to develop a free-standing-type integrated absorber-emitter for use in solar thermophotovoltaic power generation systems. The absorber-emitter-integrated film comprised a heat-resistant Ni-W alloy deposited by electroplating. A two-step silicon mould was fabricated using deep reactive-ion etching and electron beam lithography. Cavity arrays with different unit sizes were successfully fabricated on both sides of the film; these arrays are suitable for use as a solar spectrum absorber and an infrared-selective emitter. Their emissivity spectra were characterised through UV-vis-NIR and Fourier transform infrared spectroscopy.

Vertical Si nanowire arrays fabricated by magnetically guided metal-assisted chemical etching

NASA Astrophysics Data System (ADS)

Chun, Dong Won; Kim, Tae Kyoung; Choi, Duyoung; Caldwell, Elizabeth; Kim, Young Jin; Paik, Jae Cheol; Jin, Sungho; Chen, Renkun

2016-11-01

In this work, vertically aligned Si nanowire arrays were fabricated by magnetically guided metal-assisted directional chemical etching. Using an anodized aluminum oxide template as a shadow mask, nanoscale Ni dot arrays were fabricated on an Si wafer to serve as a mask to protect the Si during the etching. For the magnetically guided chemical etching, we deposited a tri-layer metal catalyst (Au/Fe/Au) in a Swiss-cheese configuration and etched the sample under the magnetic field to improve the directionality of the Si nanowire etching and increase the etching rate along the vertical direction. After the etching, the nanowires were dried with minimal surface-tension-induced aggregation by utilizing a supercritical CO2 drying procedure. High-resolution transmission electron microscopy (HR-TEM) analysis confirmed the formation of single-crystal Si nanowires. The method developed here for producing vertically aligned Si nanowire arrays could find a wide range of applications in electrochemical and electronic devices.

Composite silicon nanostructure arrays fabricated on optical fibre by chemical etching of multicrystal silicon film.

PubMed

Zuo, Zewen; Zhu, Kai; Ning, Lixin; Cui, Guanglei; Qu, Jun; Huang, Wanxia; Shi, Yi; Liu, Hong

2015-04-17

Integrating nanostructures onto optical fibers presents a promising strategy for developing new-fashioned devices and extending the scope of nanodevices' applications. Here we report the first fabrication of a composite silicon nanostructure on an optical fiber. Through direct chemical etching using an H2O2/HF solution, multicrystal silicon films with columnar microstructures are etched into a vertically aligned, inverted-cone-like nanorod array embedded in a nanocone array. A faster dissolution rate of the silicon at the void-rich boundary regions between the columns is found to be responsible for the separation of the columns, and thus the formation of the nanostructure array. The morphology of the nanorods primarily depends on the microstructure of the columns in the film. Through controlling the microstructure of the as-grown film and the etching parameters, the structural control of the nanostructure is promising. This fabrication method can be extended to a larger length scale, and it even allows roll-to-roll processing.

Fabrication of In Vitro Cancer Microtissue Array on Fibroblast-Layered Nanofibrous Membrane by Inkjet Printing

PubMed Central

Park, Tae-Min; Kang, Donggu; Jang, Ilho; Yun, Won-Soo; Shim, Jin-Hyung; Jeong, Young Hun; Kwak, Jong-Young; Yoon, Sik; Jin, Songwan

2017-01-01

In general, a drug candidate is evaluated using 2D-cultured cancer cells followed by an animal model. Despite successful preclinical testing, however, most drugs that enter human clinical trials fail. The high failure rates are mainly caused by incompatibility between the responses of the current models and humans. Here, we fabricated a cancer microtissue array in a multi-well format that exhibits heterogeneous and batch-to-batch structure by continuous deposition of collagen-suspended Hela cells on a fibroblast-layered nanofibrous membrane via inkjet printing. Expression of both Matrix Metalloproteinase 2 (MMP2) and Matrix Metalloproteinase 9 (MMP9) was higher in cancer microtissues than in fibroblast-free microtissues. The fabricated microtissues were treated with an anticancer drug, and high drug resistance to doxorubicin occurred in cancer microtissues but not in fibroblast-free microtissues. These results introduce an inkjet printing fabrication method for cancer microtissue arrays, which can be used for various applications such as early drug screening and gradual 3D cancer studies. PMID:29112150

Analysis of creating an innovative micro-lens made of polydimethylsiloxane polymer on the end of the optical fibers

NASA Astrophysics Data System (ADS)

Zboril, O.; Cubik, J.; Nedoma, J.; Fajkus, M.; Novak, M.; Jargus, J.; Stratil, T.; Vasinek, V.

2017-10-01

The article describes a method for fabrication of polymer optical micro-lenses using polydimethylsiloxane (PDMS) at the end of optical fibers. PDMS is an optically clear substance having a refractive index very similar to the optical fibers. Therefore it is an interesting material for optical purposes. PDMS is characterized by resistance to electromagnetic interference (EMI), enabling the use in electromagnetically noisy environments. These lenses could be used for example for the security applications. For the manufacture of the micro-lenses is used Sylgard silicone elastomer 184. When applied to the end of conventional optical fiber is cured by treatment at 100 °C +/- 5 °C. Authors performed a series of experimental measurements. The optical characteristics of the treated fibers compared with conventional fibers without micro-lenses. The fibers provided with optical lenses made of PDMS may be used for security applications, in the visible light communication (VLC) or as a microprobe.

Method for fabricating pixelated silicon device cells

DOEpatents

Nielson, Gregory N.; Okandan, Murat; Cruz-Campa, Jose Luis; Nelson, Jeffrey S.; Anderson, Benjamin John

2015-08-18

A method, apparatus and system for flexible, ultra-thin, and high efficiency pixelated silicon or other semiconductor photovoltaic solar cell array fabrication is disclosed. A structure and method of creation for a pixelated silicon or other semiconductor photovoltaic solar cell array with interconnects is described using a manufacturing method that is simplified compared to previous versions of pixelated silicon photovoltaic cells that require more microfabrication steps.

Developing Barbed Microtip-Based Electrode Arrays for Biopotential Measurement

PubMed Central

Hsu, Li-Sheng; Tung, Shu-Wei; Kuo, Che-Hsi; Yang, Yao-Joe

2014-01-01

This study involved fabricating barbed microtip-based electrode arrays by using silicon wet etching. KOH anisotropic wet etching was employed to form a standard pyramidal microtip array and HF/HNO3 isotropic etching was used to fabricate barbs on these microtips. To improve the electrical conductance between the tip array on the front side of the wafer and the electrical contact on the back side, a through-silicon via was created during the wet etching process. The experimental results show that the forces required to detach the barbed microtip arrays from human skin, a polydimethylsiloxane (PDMS) polymer, and a polyvinylchloride (PVC) film were larger compared with those required to detach microtip arrays that lacked barbs. The impedances of the skin-electrode interface were measured and the performance levels of the proposed dry electrode were characterized. Electrode prototypes that employed the proposed tip arrays were implemented. Electroencephalogram (EEG) and electrocardiography (ECG) recordings using these electrode prototypes were also demonstrated. PMID:25014098