Active membrane masks for improved overlay performance in proximity lithography

NASA Astrophysics Data System (ADS)

Huston, Dryver R.; Plumpton, James; Esser, Brian; Sullivan, Gerald A.

2004-07-01

Membrane masks are thin (2 micron x 35 mm x 35 mm) structures that carry the master exposure patterns in proximity (X-ray) lithography. With the continuous drive to the printing of ever-finer features in microelectronics, the reduction of mask-wafer overlay positioning errors by passive rigid body positioning and passive stress control in the mask becomes impractical due to nano and sub-micron scale elastic deformations in the membrane mask. This paper describes the design, mechanics and performance of a system for actively stretching a membrane mask in-plane to control overlay distortion. The method uses thermoelectric heating/cooling elements placed on the mask perimeter. The thermoelectric elements cause controlled thermoelastic deformations in the supporting wafer, which in turn corrects distortions in the membrane mask. Silicon carbide masks are the focus of this study, but the method is believed to be applicable to other mask materials, such as diamond. Experimental and numerical results will be presented, as well as a discussion of the design issues and related design decisions.

Synthesis study of nondestructive testing devices for use in overlay thickness design of flexible pavements

NASA Astrophysics Data System (ADS)

Smith, R. E.; Lytton, R. L.

1984-04-01

A ready reference for highway engineers who are interested in purchasing nondestructive testing (NDT) equipment for use in designing overlays for flexible pavements was prepared. All commercially available equipment is described. Information includes basic descriptions plus current prices quoted by the manufacturers/distributors. To determine user comments, a questionnaire was sent to nine State agencies, and one Federal agency. The responses to these questionnaires are summarized. Overlay thickness design procedures for flexible pavements are reviewed. Important components related to the use of NDT deflection measuremnts in overlay design are identified and addressed. Summary tables of equipment characteristics and overlay design procedures are presented.

Spectral evolution with incremental nanocoating of long period fiber gratings

NASA Astrophysics Data System (ADS)

Del Villar, Ignacio; Corres, Jesus M.; Achaerandio, Miguel; Arregui, Francisco J.; Matias, Ignacio R.

2006-12-01

The incremental deposition of a thin overlay on the cladding of a long-period fiber grating (LPFG) induces important resonance wavelength shifts in the transmission spectrum. The phenomenon is proved theoretically with a vectorial method based on hybrid modes and coupled mode theory, and experimentally with electrostatic self-assembly monolayer process. The phenomenon is repeated periodically for specific overlay thickness values with the particularity that the shape of the resonance wavelength shift depends on the thickness of the overlay. The main applications are the design of wide optical filters and multiparameter sensing devices.

Simultaneous overlay and CD measurement for double patterning: scatterometry and RCWA approach

NASA Astrophysics Data System (ADS)

Li, Jie; Liu, Zhuan; Rabello, Silvio; Dasari, Prasad; Kritsun, Oleg; Volkman, Catherine; Park, Jungchul; Singh, Lovejeet

2009-03-01

As optical lithography advances to 32 nm technology node and beyond, double patterning technology (DPT) has emerged as an attractive solution to circumvent the fundamental optical limitations. DPT poses unique demands on critical dimension (CD) uniformity and overlay control, making the tolerance decrease much faster than the rate at which critical dimension shrinks. This, in turn, makes metrology even more challenging. In the past, multi-pad diffractionbased overlay (DBO) using empirical approach has been shown to be an effective approach to measure overlay error associated with double patterning [1]. In this method, registration errors for double patterning were extracted from specially designed diffraction targets (three or four pads for each direction); CD variation is assumed negligible within each group of adjacent pads and not addressed in the measurement. In another paper, encouraging results were reported with a first attempt at simultaneously extracting overlay and CD parameters using scatterometry [2]. In this work, we apply scatterometry with a rigorous coupled wave analysis (RCWA) approach to characterize two double-patterning processes: litho-etch-litho-etch (LELE) and litho-freeze-litho-etch (LFLE). The advantage of performing rigorous modeling is to reduce the number of pads within each measurement target, thus reducing space requirement and improving throughput, and simultaneously extract CD and overlay information. This method measures overlay errors and CDs by fitting the optical signals with spectra calculated from a model of the targets. Good correlation is obtained between the results from this method and that of several reference techniques, including empirical multi-pad DBO, CD-SEM, and IBO. We also perform total measurement uncertainty (TMU) analysis to evaluate the overall performance. We demonstrate that scatterometry provides a promising solution to meet the challenging overlay metrology requirement in DPT.

Verification of the ODOT overlay design procedure : final report, June 1996.

DOT National Transportation Integrated Search

1996-06-01

The current ODOT overlay design procedure sometimes indicates additional pavement thickness is needed right after the overlay construction. Evaluation of the current procedure reveals that using spreadabiity to back calculate existing pavement modulu...

Device overlay method for high volume manufacturing

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Kim, Youngsik; Kim, Myoungsoo; Heo, Hoyoung; Jeon, Sanghuck; Choi, DongSub; Nabeth, Jeremy; Brinster, Irina; Pierson, Bill; Robinson, John C.

2016-03-01

Advancing technology nodes with smaller process margins require improved photolithography overlay control. Overlay control at develop inspection (DI) based on optical metrology targets is well established in semiconductor manufacturing. Advances in target design and metrology technology have enabled significant improvements in overlay precision and accuracy. One approach to represent in-die on-device as-etched overlay is to measure at final inspection (FI) with a scanning electron microscope (SEM). Disadvantages to this approach include inability to rework, limited layer coverage due to lack of transparency, and higher cost of ownership (CoO). A hybrid approach is investigated in this report whereby infrequent DI/FI bias is characterized and the results are used to compensate the frequent DI overlay results. The bias characterization is done on an infrequent basis, either based on time or triggered from change points. On a per-device and per-layer basis, the optical target overlay at DI is compared with SEM on-device overlay at FI. The bias characterization results are validated and tracked for use in compensating the DI APC controller. Results of the DI/FI bias characterization and sources of variation are presented, as well as the impact on the DI correctables feeding the APC system. Implementation details in a high volume manufacturing (HVM) wafer fab will be reviewed. Finally future directions of the investigation will be discussed.

Asphaltic concrete overlays of rigid and flexible pavements : final report.

DOT National Transportation Integrated Search

1980-10-01

This study evaluated the effect of a given thickness of asphaltic concrete overlay in rehabilitating 53 test sections conforming to the experiment design. This factorial design specified various levels of traffic intensity and overlay thickness for b...

Asphaltic concrete overlays of rigid and flexible pavements : interim report No. 1.

DOT National Transportation Integrated Search

1977-09-01

This study evaluated the effect of a given thickness of asphaltic concrete overlay in rehabilitating 53 test sections conforming to the experiment design. This factorial design specified various levels of traffic intensity and overlay thickness for b...

Development of an improved overlay procedure for Oregon : volume III, field manual.

DOT National Transportation Integrated Search

1987-12-01

This report is the third in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents technical guidelines for using the proposed overlay design procedure. Four areas are described, in...

Flexible pavement overlay design procedures. Volume 2: User manual

NASA Astrophysics Data System (ADS)

Majidzadeh, K.; Ilves, G. J.

1981-08-01

This user manual outlines a procedure for the design of asphaltic concrete overlays on existing asphaltic concrete pavement surfaces. It is intended as a guide to the user on the type and form of information required as input to the procedure and contains all elements necessary for the user to prepare designs for flexible pavement overlays.

Statewide implementation of very thin overlays.

DOT National Transportation Integrated Search

2014-10-01

Very thin overlays are defined as overlays where the final lift thickness is 1 inch or less. These are designed : to be high performance overlays in that they have to pass both a rutting (Hamburg Wheel tracking Test) and : reflection cracking (Overla...

Two-layer critical dimensions and overlay process window characterization and improvement in full-chip computational lithography

NASA Astrophysics Data System (ADS)

Sturtevant, John L.; Liubich, Vlad; Gupta, Rachit

2016-04-01

Edge placement error (EPE) was a term initially introduced to describe the difference between predicted pattern contour edge and the design target for a single design layer. Strictly speaking, this quantity is not directly measurable in the fab. What is of vital importance is the relative edge placement errors between different design layers, and in the era of multipatterning, the different constituent mask sublayers for a single design layer. The critical dimensions (CD) and overlay between two layers can be measured in the fab, and there has always been a strong emphasis on control of overlay between design layers. The progress in this realm has been remarkable, accelerated in part at least by the proliferation of multipatterning, which reduces the available overlay budget by introducing a coupling of overlay and CD errors for the target layer. Computational lithography makes possible the full-chip assessment of two-layer edge to edge distances and two-layer contact overlap area. We will investigate examples of via-metal model-based analysis of CD and overlay errors. We will investigate both single patterning and double patterning. For single patterning, we show the advantage of contour-to-contour simulation over contour to target simulation, and how the addition of aberrations in the optical models can provide a more realistic CD-overlay process window (PW) for edge placement errors. For double patterning, the interaction of 4-layer CD and overlay errors is very complex, but we illustrate that not only can full-chip verification identify potential two-layer hotspots, the optical proximity correction engine can act to mitigate such hotspots and enlarge the joint CD-overlay PW.

Scatterometry or imaging overlay: a comparative study

NASA Astrophysics Data System (ADS)

Hsu, Simon C. C.; Pai, Yuan Chi; Chen, Charlie; Yu, Chun Chi; Hsing, Henry; Wu, Hsing-Chien; Kuo, Kelly T. L.; Amir, Nuriel

2015-03-01

Most fabrication facilities today use imaging overlay measurement methods, as it has been the industry's reliable workhorse for decades. In the last few years, third-generation Scatterometry Overlay (SCOL™) or Diffraction Based Overlay (DBO-1) technology was developed, along another DBO technology (DBO-2). This development led to the question of where the DBO technology should be implemented for overlay measurements. Scatterometry has been adopted for high volume production in only few cases, always with imaging as a backup, but scatterometry overlay is considered by many as the technology of the future. In this paper we compare imaging overlay and DBO technologies by means of measurements and simulations. We outline issues and sensitivities for both technologies, providing guidelines for the best implementation of each. For several of the presented cases, data from two different DBO technologies are compared as well, the first with Pupil data access (DBO-1) and the other without pupil data access (DBO-2). Key indicators of overlay measurement quality include: layer coverage, accuracy, TMU, process robustness and robustness to process changes. Measurement data from real cases across the industry are compared and the conclusions are also backed by simulations. Accuracy is benchmarked with reference OVL, and self-consistency, showing good results for Imaging and DBO-1 technology. Process sensitivity and metrology robustness are mostly simulated with MTD (Metrology Target Designer) comparing the same process variations for both technologies. The experimental data presented in this study was done on ten advanced node layers and three production node layers, for all phases of the IC fabrication process (FEOL, MEOL and BEOL). The metrology tool used for most of the study is KLA-Tencor's Archer 500LCM system (scatterometry-based and imaging-based measurement technologies on the same tool) another type of tool is used for DBO-2 measurements. Finally, we conclude that both imaging overlay technology and DBO-1 technology are fully successful and have a valid roadmap for the next few design nodes, with some use cases better suited for one or the other measurement technologies. Having both imaging and DBO technology options available in parallel, allows Overlay Engineers a mix and match overlay measurement strategy, providing back up when encountering difficulties with one of the technologies and benefiting from the best of both technologies for every use case.

Predicting the accuracy of ligand overlay methods with Random Forest models.

PubMed

Nandigam, Ravi K; Evans, David A; Erickson, Jon A; Kim, Sangtae; Sutherland, Jeffrey J

2008-12-01

The accuracy of binding mode prediction using standard molecular overlay methods (ROCS, FlexS, Phase, and FieldCompare) is studied. Previous work has shown that simple decision tree modeling can be used to improve accuracy by selection of the best overlay template. This concept is extended to the use of Random Forest (RF) modeling for template and algorithm selection. An extensive data set of 815 ligand-bound X-ray structures representing 5 gene families was used for generating ca. 70,000 overlays using four programs. RF models, trained using standard measures of ligand and protein similarity and Lipinski-related descriptors, are used for automatically selecting the reference ligand and overlay method maximizing the probability of reproducing the overlay deduced from X-ray structures (i.e., using rmsd < or = 2 A as the criteria for success). RF model scores are highly predictive of overlay accuracy, and their use in template and method selection produces correct overlays in 57% of cases for 349 overlay ligands not used for training RF models. The inclusion in the models of protein sequence similarity enables the use of templates bound to related protein structures, yielding useful results even for proteins having no available X-ray structures.

A Hybrid P2P Overlay Network for Non-strictly Hierarchically Categorized Content

NASA Astrophysics Data System (ADS)

Wan, Yi; Asaka, Takuya; Takahashi, Tatsuro

In P2P content distribution systems, there are many cases in which the content can be classified into hierarchically organized categories. In this paper, we propose a hybrid overlay network design suitable for such content called Pastry/NSHCC (Pastry for Non-Strictly Hierarchically Categorized Content). The semantic information of classification hierarchies of the content can be utilized regardless of whether they are in a strict tree structure or not. By doing so, the search scope can be restrained to any granularity, and the number of query messages also decreases while maintaining keyword searching availability. Through simulation, we showed that the proposed method provides better performance and lower overhead than unstructured overlays exploiting the same semantic information.

Overlay metrology for double patterning processes

NASA Astrophysics Data System (ADS)

Leray, Philippe; Cheng, Shaunee; Laidler, David; Kandel, Daniel; Adel, Mike; Dinu, Berta; Polli, Marco; Vasconi, Mauro; Salski, Bartlomiej

2009-03-01

The double patterning (DPT) process is foreseen by the industry to be the main solution for the 32 nm technology node and even beyond. Meanwhile process compatibility has to be maintained and the performance of overlay metrology has to improve. To achieve this for Image Based Overlay (IBO), usually the optics of overlay tools are improved. It was also demonstrated that these requirements are achievable with a Diffraction Based Overlay (DBO) technique named SCOLTM [1]. In addition, we believe that overlay measurements with respect to a reference grid are required to achieve the required overlay control [2]. This induces at least a three-fold increase in the number of measurements (2 for double patterned layers to the reference grid and 1 between the double patterned layers). The requirements of process compatibility, enhanced performance and large number of measurements make the choice of overlay metrology for DPT very challenging. In this work we use different flavors of the standard overlay metrology technique (IBO) as well as the new technique (SCOL) to address these three requirements. The compatibility of the corresponding overlay targets with double patterning processes (Litho-Etch-Litho-Etch (LELE); Litho-Freeze-Litho-Etch (LFLE), Spacer defined) is tested. The process impact on different target types is discussed (CD bias LELE, Contrast for LFLE). We compare the standard imaging overlay metrology with non-standard imaging techniques dedicated to double patterning processes (multilayer imaging targets allowing one overlay target instead of three, very small imaging targets). In addition to standard designs already discussed [1], we investigate SCOL target designs specific to double patterning processes. The feedback to the scanner is determined using the different techniques. The final overlay results obtained are compared accordingly. We conclude with the pros and cons of each technique and suggest the optimal metrology strategy for overlay control in double patterning processes.

The effect of individually-induced processes on image-based overlay and diffraction-based overlay

NASA Astrophysics Data System (ADS)

Oh, SeungHwa; Lee, Jeongjin; Lee, Seungyoon; Hwang, Chan; Choi, Gilheyun; Kang, Ho-Kyu; Jung, EunSeung

2014-04-01

In this paper, set of wafers with separated processes was prepared and overlay measurement result was compared in two methods; IBO and DBO. Based on the experimental result, theoretical approach of relationship between overlay mark deformation and overlay variation is presented. Moreover, overlay reading simulation was used in verification and prediction of overlay variation due to deformation of overlay mark caused by induced processes. Through this study, understanding of individual process effects on overlay measurement error is given. Additionally, guideline of selecting proper overlay measurement scheme for specific layer is presented.

Reducing the overlay metrology sensitivity to perturbations of the measurement stack

NASA Astrophysics Data System (ADS)

Zhou, Yue; Park, DeNeil; Gutjahr, Karsten; Gottipati, Abhishek; Vuong, Tam; Bae, Sung Yong; Stokes, Nicholas; Jiang, Aiqin; Hsu, Po Ya; O'Mahony, Mark; Donini, Andrea; Visser, Bart; de Ruiter, Chris; Grzela, Grzegorz; van der Laan, Hans; Jak, Martin; Izikson, Pavel; Morgan, Stephen

2017-03-01

Overlay metrology setup today faces a continuously changing landscape of process steps. During Diffraction Based Overlay (DBO) metrology setup, many different metrology target designs are evaluated in order to cover the full process window. The standard method for overlay metrology setup consists of single-wafer optimization in which the performance of all available metrology targets is evaluated. Without the availability of external reference data or multiwafer measurements it is hard to predict the metrology accuracy and robustness against process variations which naturally occur from wafer-to-wafer and lot-to-lot. In this paper, the capabilities of the Holistic Metrology Qualification (HMQ) setup flow are outlined, in particular with respect to overlay metrology accuracy and process robustness. The significance of robustness and its impact on overlay measurements is discussed using multiple examples. Measurement differences caused by slight stack variations across the target area, called grating imbalance, are shown to cause significant errors in the overlay calculation in case the recipe and target have not been selected properly. To this point, an overlay sensitivity check on perturbations of the measurement stack is presented for improvement of the overlay metrology setup flow. An extensive analysis on Key Performance Indicators (KPIs) from HMQ recipe optimization is performed on µDBO measurements of product wafers. The key parameters describing the sensitivity to perturbations of the measurement stack are based on an intra-target analysis. Using advanced image analysis, which is only possible for image plane detection of μDBO instead of pupil plane detection of DBO, the process robustness performance of a recipe can be determined. Intra-target analysis can be applied for a wide range of applications, independent of layers and devices.

Promoting Learning of Instructional Design via Overlay Design Tools

ERIC Educational Resources Information Center

Carle, Andrew Jacob

2012-01-01

I begin by introducing Virtual Design Apprenticeship (VDA), a learning model--built on a solid foundation of education principles and theories--that promotes learning of design skills via overlay design tools. In VDA, when an individual needs to learn a new design skill or paradigm she is provided accessible, concrete examples that have been…

Hybrid overlay metrology for high order correction by using CDSEM

NASA Astrophysics Data System (ADS)

Leray, Philippe; Halder, Sandip; Lorusso, Gian; Baudemprez, Bart; Inoue, Osamu; Okagawa, Yutaka

2016-03-01

Overlay control has become one of the most critical issues for semiconductor manufacturing. Advanced lithographic scanners use high-order corrections or correction per exposure to reduce the residual overlay. It is not enough in traditional feedback of overlay measurement by using ADI wafer because overlay error depends on other process (etching process and film stress, etc.). It needs high accuracy overlay measurement by using AEI wafer. WIS (Wafer Induced Shift) is the main issue for optical overlay, IBO (Image Based Overlay) and DBO (Diffraction Based Overlay). We design dedicated SEM overlay targets for dual damascene process of N10 by i-ArF multi-patterning. The pattern is same as device-pattern locally. Optical overlay tools select segmented pattern to reduce the WIS. However segmentation has limit, especially the via-pattern, for keeping the sensitivity and accuracy. We evaluate difference between the viapattern and relaxed pitch gratings which are similar to optical overlay target at AEI. CDSEM can estimate asymmetry property of target from image of pattern edge. CDSEM can estimate asymmetry property of target from image of pattern edge. We will compare full map of SEM overlay to full map of optical overlay for high order correction ( correctables and residual fingerprints).

Herpin effective media resonant underlayers and resonant overlayer designs for ultra-high NA interference lithography.

PubMed

Bourke, Levi; Blaikie, Richard J

2017-12-01

Dielectric waveguide resonant underlayers are employed in ultra-high NA interference photolithography to effectively double the depth of field. Generally a single high refractive index waveguiding layer is employed. Here multilayer Herpin effective medium methods are explored to develop equivalent multilayer waveguiding layers. Herpin equivalent resonant underlayers are shown to be suitable replacements provided at least one layer within the Herpin trilayer supports propagating fields. In addition, a method of increasing the intensity incident upon the photoresist using resonant overlayers is also developed. This method is shown to greatly enhance the intensity within the photoresist making the use of thicker, safer, non-absorbing, low refractive index matching liquids potentially suitable for large-scale applications.

Concrete overlays : an established technology with new applications

DOT National Transportation Integrated Search

2008-08-01

CPTP is an integrated, national effort to improve the long-term performance and cost-effectiveness of concrete pavements by implementing improved methods of design, construction, and rehabilitation and new technology. CPTP is an integrated, national ...

Assessment of Potential Location of High Arsenic Contamination Using Fuzzy Overlay and Spatial Anisotropy Approach in Iron Mine Surrounding Area

PubMed Central

Wirojanagud, Wanpen; Srisatit, Thares

2014-01-01

Fuzzy overlay approach on three raster maps including land slope, soil type, and distance to stream can be used to identify the most potential locations of high arsenic contamination in soils. Verification of high arsenic contamination was made by collection samples and analysis of arsenic content and interpolation surface by spatial anisotropic method. A total of 51 soil samples were collected at the potential contaminated location clarified by fuzzy overlay approach. At each location, soil samples were taken at the depth of 0.00-1.00 m from the surface ground level. Interpolation surface of the analysed arsenic content using spatial anisotropic would verify the potential arsenic contamination location obtained from fuzzy overlay outputs. Both outputs of the spatial surface anisotropic and the fuzzy overlay mapping were significantly spatially conformed. Three contaminated areas with arsenic concentrations of 7.19 ± 2.86, 6.60 ± 3.04, and 4.90 ± 2.67 mg/kg exceeded the arsenic content of 3.9 mg/kg, the maximum concentration level (MCL) for agricultural soils as designated by Office of National Environment Board of Thailand. It is concluded that fuzzy overlay mapping could be employed for identification of potential contamination area with the verification by surface anisotropic approach including intensive sampling and analysis of the substances of interest. PMID:25110751

Fast 3D shape screening of large chemical databases through alignment-recycling

PubMed Central

Fontaine, Fabien; Bolton, Evan; Borodina, Yulia; Bryant, Stephen H

2007-01-01

Background Large chemical databases require fast, efficient, and simple ways of looking for similar structures. Although such tasks are now fairly well resolved for graph-based similarity queries, they remain an issue for 3D approaches, particularly for those based on 3D shape overlays. Inspired by a recent technique developed to compare molecular shapes, we designed a hybrid methodology, alignment-recycling, that enables efficient retrieval and alignment of structures with similar 3D shapes. Results Using a dataset of more than one million PubChem compounds of limited size (< 28 heavy atoms) and flexibility (< 6 rotatable bonds), we obtained a set of a few thousand diverse structures covering entirely the 3D shape space of the conformers of the dataset. Transformation matrices gathered from the overlays between these diverse structures and the 3D conformer dataset allowed us to drastically (100-fold) reduce the CPU time required for shape overlay. The alignment-recycling heuristic produces results consistent with de novo alignment calculation, with better than 80% hit list overlap on average. Conclusion Overlay-based 3D methods are computationally demanding when searching large databases. Alignment-recycling reduces the CPU time to perform shape similarity searches by breaking the alignment problem into three steps: selection of diverse shapes to describe the database shape-space; overlay of the database conformers to the diverse shapes; and non-optimized overlay of query and database conformers using common reference shapes. The precomputation, required by the first two steps, is a significant cost of the method; however, once performed, querying is two orders of magnitude faster. Extensions and variations of this methodology, for example, to handle more flexible and larger small-molecules are discussed. PMID:17880744

Performance evaluation of bridges with structural bridge deck overlays (SBDO).

DOT National Transportation Integrated Search

2006-03-01

Structural Bridge Deck Overlay (SBDO) involves applying 6 to 10 inches (150 to 200 mm) of normal weight, class AA, reinforced concrete directly to a bridges original slab. The overlay is designed to increase the deck elevation to an extent that st...

Overlay improvement methods with diffraction based overlay and integrated metrology

NASA Astrophysics Data System (ADS)

Nam, Young-Sun; Kim, Sunny; Shin, Ju Hee; Choi, Young Sin; Yun, Sang Ho; Kim, Young Hoon; Shin, Si Woo; Kong, Jeong Heung; Kang, Young Seog; Ha, Hun Hwan

2015-03-01

To accord with new requirement of securing more overlay margin, not only the optical overlay measurement is faced with the technical limitations to represent cell pattern's behavior, but also the larger measurement samples are inevitable for minimizing statistical errors and better estimation of circumstance in a lot. From these reasons, diffraction based overlay (DBO) and integrated metrology (IM) were mainly proposed as new approaches for overlay enhancement in this paper.

Evaluation of maintenance/rehabilitation alternatives for continuously reinforced concrete pavement

NASA Astrophysics Data System (ADS)

Barnett, T. L.; Darter, M. I.; Laybourne, N. R.

1981-05-01

The design, construction, performance, and costs of several maintenance and rehabilitation methods were evaluated. Patching, cement grout and asphalt undersealing, epoxying of cracks, and an asphalt overlay were considered. Nondestructive testing, deflections, reflection cracking, cost, and statistical analyses were used to evaluate the methods.

Investigation of aged hot-mix asphalt pavements : technical summary.

DOT National Transportation Integrated Search

2013-09-01

Over the lifetime of an asphalt concrete (AC) pavement, the roadway requires periodic resurfacing and rehabilitation to provide acceptable performance. The most popular resurfacing method is an asphalt overlay over the existing roadway. In the design...

Computer vision and soft computing for automatic skull-face overlay in craniofacial superimposition.

PubMed

Campomanes-Álvarez, B Rosario; Ibáñez, O; Navarro, F; Alemán, I; Botella, M; Damas, S; Cordón, O

2014-12-01

Craniofacial superimposition can provide evidence to support that some human skeletal remains belong or not to a missing person. It involves the process of overlaying a skull with a number of ante mortem images of an individual and the analysis of their morphological correspondence. Within the craniofacial superimposition process, the skull-face overlay stage just focuses on achieving the best possible overlay of the skull and a single ante mortem image of the suspect. Although craniofacial superimposition has been in use for over a century, skull-face overlay is still applied by means of a trial-and-error approach without an automatic method. Practitioners finish the process once they consider that a good enough overlay has been attained. Hence, skull-face overlay is a very challenging, subjective, error prone, and time consuming part of the whole process. Though the numerical assessment of the method quality has not been achieved yet, computer vision and soft computing arise as powerful tools to automate it, dramatically reducing the time taken by the expert and obtaining an unbiased overlay result. In this manuscript, we justify and analyze the use of these techniques to properly model the skull-face overlay problem. We also present the automatic technical procedure we have developed using these computational methods and show the four overlays obtained in two craniofacial superimposition cases. This automatic procedure can be thus considered as a tool to aid forensic anthropologists to develop the skull-face overlay, automating and avoiding subjectivity of the most tedious task within craniofacial superimposition. Copyright © 2014 Elsevier Ireland Ltd. All rights reserved.

In-die mask registration measurement on 28nm-node and beyond

NASA Astrophysics Data System (ADS)

Chen, Shen Hung; Cheng, Yung Feng; Chen, Ming Jui

2013-09-01

As semiconductor go to smaller node, the critical dimension (CD) of process become more and more small. For lithography, RET (Resolution Enhancement Technology) applications can be used for wafer printing of smaller CD/pitch on 28nm node and beyond. SMO (Source Mask Optimization), DPT (Double Patterning Technology) and SADP (Self-Align Double Patterning) can provide lower k1 value for lithography. In another way, image placement error and overlay control also become more and more important for smaller chip size (advanced node). Mask registration (image placement error) and mask overlay are important factors to affect wafer overlay control/performance especially for DPT or SADP. In traditional method, the designed registration marks (cross type, square type) with larger CD were put into scribe-line of mask frame for registration and overlay measurement. However, these patterns are far way from real patterns. It does not show the registration of real pattern directly and is not a convincing method. In this study, the in-die (in-chip) registration measurement is introduced. We extract the dummy patterns that are close to main pattern from post-OPC (Optical Proximity Correction) gds by our desired rule and choose the patterns that distribute over whole mask uniformly. The convergence test shows 100 points measurement has a reliable result.

Design and construction of a bonded fiber concrete overlay of CRCP : final report.

DOT National Transportation Integrated Search

1992-01-01

The purpose of this study was to evaluate a bonded steel fiber reinforced concrete overlay on an existing 8-inch CRC pavement on Interstate 10 south of Baton Rough, LA. The project objectives were to provide an overlay with a high probability for lon...

Continued implementation of high performance thin overlays in Texas districts.

DOT National Transportation Integrated Search

2017-06-22

As part of Research Project 0-5598, outputs include guidelines and specifications on how a district can design and construct long-life overlays using the concept of balanced mix design; and training materials describing the best ways to select, desig...

Overcoming Sequence Misalignments with Weighted Structural Superposition

PubMed Central

Khazanov, Nickolay A.; Damm-Ganamet, Kelly L.; Quang, Daniel X.; Carlson, Heather A.

2012-01-01

An appropriate structural superposition identifies similarities and differences between homologous proteins that are not evident from sequence alignments alone. We have coupled our Gaussian-weighted RMSD (wRMSD) tool with a sequence aligner and seed extension (SE) algorithm to create a robust technique for overlaying structures and aligning sequences of homologous proteins (HwRMSD). HwRMSD overcomes errors in the initial sequence alignment that would normally propagate into a standard RMSD overlay. SE can generate a corrected sequence alignment from the improved structural superposition obtained by wRMSD. HwRMSD’s robust performance and its superiority over standard RMSD are demonstrated over a range of homologous proteins. Its better overlay results in corrected sequence alignments with good agreement to HOMSTRAD. Finally, HwRMSD is compared to established structural alignment methods: FATCAT, SSM, CE, and Dalilite. Most methods are comparable at placing residue pairs within 2 Å, but HwRMSD places many more residue pairs within 1 Å, providing a clear advantage. Such high accuracy is essential in drug design, where small distances can have a large impact on computational predictions. This level of accuracy is also needed to correct sequence alignments in an automated fashion, especially for omics-scale analysis. HwRMSD can align homologs with low sequence identity and large conformational differences, cases where both sequence-based and structural-based methods may fail. The HwRMSD pipeline overcomes the dependency of structural overlays on initial sequence pairing and removes the need to determine the best sequence-alignment method, substitution matrix, and gap parameters for each unique pair of homologs. PMID:22733542

Proteins detection by polymer optical fibers sensitised with overlayers of block and random copolymers

NASA Astrophysics Data System (ADS)

El Sachat, Alexandros; Meristoudi, Anastasia; Markos, Christos; Pispas, Stergios; Riziotis, Christos

2014-03-01

A low cost and low complexity optical detection method of proteins is presented by employing a detection scheme based on electrostatic interactions, and implemented by sensitization of a polymer optical fibers' (POF) surface by thin overlayers of properly designed sensitive copolymer materials with predesigned charges. This method enables the fast detection of proteins having opposite charge to the overlayer, and also the effective discrimination of differently charged proteins like lysozyme (LYS) and bovine serum albumin (BSA). As sensitive materials the block and the random copolymers of the same monomers were employed, namely the block copolymer poly(styrene-b-2vinylpyridine) (PS-b- P2VP) and the corresponding random copolymer poly(styrene-r-2vinylpyridine) (PS-r-P2VP), of similar composition and molecular weights. Results show systematically different response between the block and the random copolymers, although of the same order of magnitude, drawing thus important conclusions on their applications' techno-economic aspects given that they have significantly different associated manufacturing method and costs. The use of the POF platform, in combination with those adaptable copolymer sensing materials could lead to efficient low cost bio-detection schemes.

Development of an improved overlay design procedure for Oregon : volume II, evaluation of procedure.

DOT National Transportation Integrated Search

1987-12-01

This report is the second in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents the results of the second-year findings. Data from five projects were collected and analyzed usin...

Design and performance evaluation of very thin overlays in Texas.

DOT National Transportation Integrated Search

2009-06-01

Very thin overlays 1-inch thick or less were placed as surface layers on five major highways in Texas. : These mixes were designed in the laboratory to have a balance of good rut resistance as measured by : TxDOTs Hamburg Wheel Tracking test and g...

Diffraction-based overlay metrology for double patterning technologies

NASA Astrophysics Data System (ADS)

Dasari, Prasad; Korlahalli, Rahul; Li, Jie; Smith, Nigel; Kritsun, Oleg; Volkman, Cathy

2009-03-01

The extension of optical lithography to 32nm and beyond is made possible by Double Patterning Techniques (DPT) at critical levels of the process flow. The ease of DPT implementation is hindered by increased significance of critical dimension uniformity and overlay errors. Diffraction-based overlay (DBO) has shown to be an effective metrology solution for accurate determination of the overlay errors associated with double patterning [1, 2] processes. In this paper we will report its use in litho-freeze-litho-etch (LFLE) and spacer double patterning technology (SDPT), which are pitch splitting solutions that reduce the significance of overlay errors. Since the control of overlay between various mask/level combinations is critical for fabrication, precise and accurate assessment of errors by advanced metrology techniques such as spectroscopic diffraction based overlay (DBO) and traditional image-based overlay (IBO) using advanced target designs will be reported. A comparison between DBO, IBO and CD-SEM measurements will be reported. . A discussion of TMU requirements for 32nm technology and TMU performance data of LFLE and SDPT targets by different overlay approaches will be presented.

Accelerated testing for studying pavement design and performance (FY 2000) : effectiveness of fiber reinforced and plain, ultra-thin concrete overlays on Portland Cement Concrete Pavement (PCCP).

DOT National Transportation Integrated Search

2003-11-01

The objective of the research was to compare the performance of fiber reinforced and plain PCC concrete overlay when used as a thin non-dowelled overlay on top of a rubblized, distressed concrete pavement. The experiment was conducted at the Accelera...

Enabling optical metrology on small 5×5μm2 in-cell targets to support flexible sampling and higher order overlay and CD control for advanced logic devices nodes

NASA Astrophysics Data System (ADS)

Salerno, Antonio; de la Fuente, Isabel; Hsu, Zack; Tai, Alan; Chang, Hammer; McNamara, Elliott; Cramer, Hugo; Li, Daoping

2018-03-01

In next generation Logic devices, overlay control requirements shrink to sub 2.5nm level on-product overlay. Historically on-product overlay has been defined by the overlay capability of after-develop in-scribe targets. However, due to design and dimension, the after development metrology targets are not completely representative for the final overlay of the device. In addition, they are confined to the scribe-lane area, which limits the sampling possibilities. To address these two issues, metrology on structures matching the device structure and which can be sampled with high density across the device is required. Conventional after-etch CDSEM techniques on logic devices present difficulties in discerning the layers of interest, potential destructive charging effects and finally, they are limited by the long measurement times[1] [2] [3] . All together, limit the sampling densities and making CDSEM less attractive for control applications. Optical metrology can overcome most of these limitations. Such measurement, however, does require repetitive structures. This requirement is not fulfilled by logic devices, as the features vary in pitch and CD over the exposure field. The solution is to use small targets, with a maximum pad size of 5x5um2 , which can easily be placed in the logic cell area. These targets share the process and architecture of the device features of interest, but with a modified design that replicates as close as possible the device layout, allowing for in-device metrology for both CD and Overlay. This solution enables measuring closer to the actual product feature location and, not being limited to scribe-lanes, it opens the possibility of higher-density sampling schemes across the field. In summary, these targets become the facilitator of in-device metrology (IDM), that is, enabling the measurements both in-device Overlay and the CD parameters of interest and can deliver accurate, high-throughput, dense and after-etch measurements for Logic. Overlay improvements derived from a high-densely sampled Overlay map measured with 5x5 um2 In Device Metrology (IDM) targets were investigated on a customer Logic application. In this work we present both the main design aspects of the 5x5 um2 IDM targets, as well as the results on the improved Overlay performance.

Development of an improved overlay design procedure for Oregon : vol. I, interim report, background and framework.

DOT National Transportation Integrated Search

1986-12-01

This report is the first in a three-volume series dealing with the development of an improved overlay design procedure for Oregon. This report presents the results of the first-year findings and includes: (1) a detailed review of the literature; (2) ...

The overlay tester (OT) : comparison with other crack test methods and recommendations for surrogate crack tests.

DOT National Transportation Integrated Search

2012-10-01

Presently, one of the principal performance concerns of hot-mix asphalt (HMA) pavements is premature : cracking, particularly of HMA surfacing mixes. Regrettably, however, while many USA transportation agencies have : implemented design-level tests t...

A comparative study between xerographic, computer-assisted overlay generation and animated-superimposition methods in bite mark analyses.

PubMed

Tai, Meng Wei; Chong, Zhen Feng; Asif, Muhammad Khan; Rahmat, Rabiah A; Nambiar, Phrabhakaran

2016-09-01

This study was to compare the suitability and precision of xerographic and computer-assisted methods for bite mark investigations. Eleven subjects were asked to bite on their forearm and the bite marks were photographically recorded. Alginate impressions of the subjects' dentition were taken and their casts were made using dental stone. The overlays generated by xerographic method were obtained by photocopying the subjects' casts and the incisal edge outlines were then transferred on a transparent sheet. The bite mark images were imported into Adobe Photoshop® software and printed to life-size. The bite mark analyses using xerographically generated overlays were done by comparing an overlay to the corresponding printed bite mark images manually. In computer-assisted method, the subjects' casts were scanned into Adobe Photoshop®. The bite mark analyses using computer-assisted overlay generation were done by matching an overlay and the corresponding bite mark images digitally using Adobe Photoshop®. Another comparison method was superimposing the cast images with corresponding bite mark images employing the Adobe Photoshop® CS6 and GIF-Animator©. A score with a range of 0-3 was given during analysis to each precision-determining criterion and the score was increased with better matching. The Kruskal Wallis H test showed significant difference between the three sets of data (H=18.761, p<0.05). In conclusion, bite mark analysis using the computer-assisted animated-superimposition method was the most accurate, followed by the computer-assisted overlay generation and lastly the xerographic method. The superior precision contributed by digital method is discernible despite the human skin being a poor recording medium of bite marks. Copyright © 2016 Elsevier Ireland Ltd. All rights reserved.

Solar selective absorption coatings

DOEpatents

Mahoney, Alan R [Albuquerque, NM; Reed, Scott T [Albuquerque, NM; Ashley, Carol S [Albuquerque, NM; Martinez, F Edward [Horseheads, NY

2004-08-31

A new class of solar selective absorption coatings are disclosed. These coatings comprise a structured metallic overlayer such that the overlayer has a sub-micron structure designed to efficiently absorb solar radiation, while retaining low thermal emissivity for infrared thermal radiation. A sol-gel layer protects the structured metallic overlayer from mechanical, thermal, and environmental degradation. Processes for producing such solar selective absorption coatings are also disclosed.

Solar selective absorption coatings

DOEpatents

Mahoney, Alan R [Albuquerque, NM; Reed, Scott T [Albuquerque, NM; Ashley, Carol S [Albuquerque, NM; Martinez, F Edward [Horseheads, NY

2003-10-14

A new class of solar selective absorption coatings are disclosed. These coatings comprise a structured metallic overlayer such that the overlayer has a sub-micron structure designed to efficiently absorb solar radiation, while retaining low thermal emissivity for infrared thermal radiation. A sol-gel layer protects the structured metallic overlayer from mechanical, thermal, and environmental degradation. Processes for producing such solar selective absorption coatings are also disclosed.

Vision-based overlay of a virtual object into real scene for designing room interior

NASA Astrophysics Data System (ADS)

Harasaki, Shunsuke; Saito, Hideo

2001-10-01

In this paper, we introduce a geometric registration method for augmented reality (AR) and an application system, interior simulator, in which a virtual (CG) object can be overlaid into a real world space. Interior simulator is developed as an example of an AR application of the proposed method. Using interior simulator, users can visually simulate the location of virtual furniture and articles in the living room so that they can easily design the living room interior without placing real furniture and articles, by viewing from many different locations and orientations in real-time. In our system, two base images of a real world space are captured from two different views for defining a projective coordinate of object 3D space. Then each projective view of a virtual object in the base images are registered interactively. After such coordinate determination, an image sequence of a real world space is captured by hand-held camera with tracking non-metric measured feature points for overlaying a virtual object. Virtual objects can be overlaid onto the image sequence by taking each relationship between the images. With the proposed system, 3D position tracking device, such as magnetic trackers, are not required for the overlay of virtual objects. Experimental results demonstrate that 3D virtual furniture can be overlaid into an image sequence of the scene of a living room nearly at video rate (20 frames per second).

A hybrid solution using computational prediction and measured data to accurately determine process corrections with reduced overlay sampling

NASA Astrophysics Data System (ADS)

Noyes, Ben F.; Mokaberi, Babak; Mandoy, Ram; Pate, Alex; Huijgen, Ralph; McBurney, Mike; Chen, Owen

2017-03-01

Reducing overlay error via an accurate APC feedback system is one of the main challenges in high volume production of the current and future nodes in the semiconductor industry. The overlay feedback system directly affects the number of dies meeting overlay specification and the number of layers requiring dedicated exposure tools through the fabrication flow. Increasing the former number and reducing the latter number is beneficial for the overall efficiency and yield of the fabrication process. An overlay feedback system requires accurate determination of the overlay error, or fingerprint, on exposed wafers in order to determine corrections to be automatically and dynamically applied to the exposure of future wafers. Since current and future nodes require correction per exposure (CPE), the resolution of the overlay fingerprint must be high enough to accommodate CPE in the overlay feedback system, or overlay control module (OCM). Determining a high resolution fingerprint from measured data requires extremely dense overlay sampling that takes a significant amount of measurement time. For static corrections this is acceptable, but in an automated dynamic correction system this method creates extreme bottlenecks for the throughput of said system as new lots have to wait until the previous lot is measured. One solution is using a less dense overlay sampling scheme and employing computationally up-sampled data to a dense fingerprint. That method uses a global fingerprint model over the entire wafer; measured localized overlay errors are therefore not always represented in its up-sampled output. This paper will discuss a hybrid system shown in Fig. 1 that combines a computationally up-sampled fingerprint with the measured data to more accurately capture the actual fingerprint, including local overlay errors. Such a hybrid system is shown to result in reduced modelled residuals while determining the fingerprint, and better on-product overlay performance.

Asphaltic concrete overlays of rigid and flexible pavements

NASA Astrophysics Data System (ADS)

Kinchen, R. W.; Temple, W. H.

1980-10-01

The development of a mechanistic approach to overlay thickness selection is described. The procedure utilizes a deflection analysis to determine pavement rehabilitation needs. Design guides for selecting the overlay thickness are presented. Tolerable deflection-traffic load relationships and the deflection attenuation properties of asphaltic concrete were developed, representing the subgrade support conditions and properties of materials used in Louisiana. All deflection measurements on asphaltic concrete were corrected for the effect of temperature. Deflection measurements taken before and after overlay were also adjusted to minimize the effects of seasonal subgrade moisture variation.

A comparison of advanced overlay technologies

NASA Astrophysics Data System (ADS)

Dasari, Prasad; Smith, Nigel; Goelzer, Gary; Liu, Zhuan; Li, Jie; Tan, Asher; Koh, Chin Hwee

2010-03-01

The extension of optical lithography to 22nm and beyond by Double Patterning Technology is often challenged by CDU and overlay control. With reduced overlay measurement error budgets in the sub-nm range, relying on traditional Total Measurement Uncertainty (TMU) estimates alone is no longer sufficient. In this paper we will report scatterometry overlay measurements data from a set of twelve test wafers, using four different target designs. The TMU of these measurements is under 0.4nm, within the process control requirements for the 22nm node. Comparing the measurement differences between DBO targets (using empirical and model based analysis) and with image-based overlay data indicates the presence of systematic and random measurement errors that exceeds the TMU estimate.

Measuring and Advancing Experimental Design Ability in an Introductory Course without Altering Existing Lab Curriculum.

PubMed

Shanks, Ryan A; Robertson, Chuck L; Haygood, Christian S; Herdliksa, Anna M; Herdliska, Heather R; Lloyd, Steven A

2017-01-01

Introductory biology courses provide an important opportunity to prepare students for future courses, yet existing cookbook labs, although important in their own way, fail to provide many of the advantages of semester-long research experiences. Engaging, authentic research experiences aid biology students in meeting many learning goals. Therefore, overlaying a research experience onto the existing lab structure allows faculty to overcome barriers involving curricular change. Here we propose a working model for this overlay design in an introductory biology course and detail a means to conduct this lab with minimal increases in student and faculty workloads. Furthermore, we conducted exploratory factor analysis of the Experimental Design Ability Test (EDAT) and uncovered two latent factors which provide valid means to assess this overlay model's ability to increase advanced experimental design abilities. In a pre-test/post-test design, we demonstrate significant increases in both basic and advanced experimental design abilities in an experimental and comparison group. We measured significantly higher gains in advanced experimental design understanding in students in the experimental group. We believe this overlay model and EDAT factor analysis contribute a novel means to conduct and assess the effectiveness of authentic research experiences in an introductory course without major changes to the course curriculum and with minimal increases in faculty and student workloads.

Overlay accuracy with respect to device scaling

NASA Astrophysics Data System (ADS)

Leray, Philippe; Laidler, David; Cheng, Shaunee

2012-03-01

Overlay metrology performance is usually reported as repeatability, matching between tools or optics aberrations distorting the measurement (Tool induced shift or TIS). Over the last few years, improvement of these metrics by the tool suppliers has been impressive. But, what about accuracy? Using different target types, we have already reported small differences in the mean value as well as fingerprint [1]. These differences make the correctables questionable. Which target is correct and therefore which translation, scaling etc. values should be fed back to the scanner? In this paper we investigate the sources of these differences, using several approaches. First, we measure the response of different targets to offsets programmed in a test vehicle. Second, we check the response of the same overlay targets to overlay errors programmed into the scanner. We compare overlay target designs; what is the contribution of the size of the features that make up the target? We use different overlay measurement techniques; is DBO (Diffraction Based Overlay) more accurate than IBO (Image Based Overlay)? We measure overlay on several stacks; what is the stack contribution to inaccuracy? In conclusion, we offer an explanation for the observed differences and propose a solution to reduce them.

Study of correlation between overlay and displacement measured by Coherent Gradient Sensing (CGS) interferometry

NASA Astrophysics Data System (ADS)

Mileham, Jeffrey; Tanaka, Yasushi; Anberg, Doug; Owen, David M.; Lee, Byoung-Ho; Bouche, Eric

2016-03-01

Within the semiconductor lithographic process, alignment control is one of the most critical considerations. In order to realize high device performance, semiconductor technology is approaching the 10 nm design rule, which requires progressively smaller overlay budgets. Simultaneously, structures are expanding in the 3rd dimension, thereby increasing the potential for inter-layer distortion. For these reasons, device patterning is becoming increasingly difficult as the portion of the overlay budget attributed to process-induced variation increases. After lithography, overlay gives valuable feedback to the lithography tool; however overlay measurements typically have limited density, especially at the wafer edge, due to throughput considerations. Moreover, since overlay is measured after lithography, it can only react to, but not predict the process-induced overlay. This study is a joint investigation in a high-volume manufacturing environment of the portion of overlay associated with displacement induced by a single process across many chambers. Displacement measurements are measured by Coherent Gradient Sensing (CGS) interferometry, which generates high-density displacement maps (>3 million points on a 300 mm wafer) such that the stresses induced die-by-die and process-by-process can be tracked in detail. The results indicate the relationship between displacement and overlay shows the ability to forecast overlay values before the lithographic process. Details of the correlation including overlay/displacement range, and lot-to-lot displacement variability are considered.

Application of advanced diffraction based optical metrology overlay capabilities for high-volume manufacturing

NASA Astrophysics Data System (ADS)

Chen, Kai-Hsiung; Huang, Guo-Tsai; Hsieh, Hung-Chih; Ni, Wei-Feng; Chuang, S. M.; Chuang, T. K.; Ke, Chih-Ming; Huang, Jacky; Rao, Shiuan-An; Cumurcu Gysen, Aysegul; d'Alfonso, Maxime; Yueh, Jenny; Izikson, Pavel; Soco, Aileen; Wu, Jon; Nooitgedagt, Tjitte; Ottens, Jeroen; Kim, Yong Ho; Ebert, Martin

2017-03-01

On-product overlay requirements are becoming more challenging with every next technology node due to the continued decrease of the device dimensions and process tolerances. Therefore, current and future technology nodes require demanding metrology capabilities such as target designs that are robust towards process variations and high overlay measurement density (e.g. for higher order process corrections) to enable advanced process control solutions. The impact of advanced control solutions based on YieldStar overlay data is being presented in this paper. Multi patterning techniques are applied for critical layers and leading to additional overlay measurement demands. The use of 1D process steps results in the need of overlay measurements relative to more than one layer. Dealing with the increased number of overlay measurements while keeping the high measurement density and metrology accuracy at the same time presents a challenge for high volume manufacturing (HVM). These challenges are addressed by the capability to measure multi-layer targets with the recently introduced YieldStar metrology tool, YS350. On-product overlay results of such multi-layers and standard targets are presented including measurement stability performance.

Real-time self-calibration of a tracked augmented reality display

NASA Astrophysics Data System (ADS)

Baum, Zachary; Lasso, Andras; Ungi, Tamas; Fichtinger, Gabor

2016-03-01

PURPOSE: Augmented reality systems have been proposed for image-guided needle interventions but they have not become widely used in clinical practice due to restrictions such as limited portability, low display refresh rates, and tedious calibration procedures. We propose a handheld tablet-based self-calibrating image overlay system. METHODS: A modular handheld augmented reality viewbox was constructed from a tablet computer and a semi-transparent mirror. A consistent and precise self-calibration method, without the use of any temporary markers, was designed to achieve an accurate calibration of the system. Markers attached to the viewbox and patient are simultaneously tracked using an optical pose tracker to report the position of the patient with respect to a displayed image plane that is visualized in real-time. The software was built using the open-source 3D Slicer application platform's SlicerIGT extension and the PLUS toolkit. RESULTS: The accuracy of the image overlay with image-guided needle interventions yielded a mean absolute position error of 0.99 mm (95th percentile 1.93 mm) in-plane of the overlay and a mean absolute position error of 0.61 mm (95th percentile 1.19 mm) out-of-plane. This accuracy is clinically acceptable for tool guidance during various procedures, such as musculoskeletal injections. CONCLUSION: A self-calibration method was developed and evaluated for a tracked augmented reality display. The results show potential for the use of handheld image overlays in clinical studies with image-guided needle interventions.

Bituminous concrete overlay studies.

DOT National Transportation Integrated Search

1971-01-01

Deflection tests conducted on eight sections of primary highway, both before and after asphaltic concrete resurfacings, were analyzed as a study of the utility of such tests in the design of overlays. The application of tentative traffic and allowabl...

The overlay tester : a sensitivity study to improve repeatability and minimize variability in the test results.

DOT National Transportation Integrated Search

2012-02-01

Hot mix asphalt (HMA) overlay is one of the most commonly used methods for rehabilitating deteriorated pavements. One major type of distress influencing the life of an overlay is reflective cracking. Many departments of transportation have implemente...

Iowa task report : US 18 concrete overlay construction under traffic.

DOT National Transportation Integrated Search

2012-05-01

The National Concrete Pavement Technology Center, Iowa Department of Transportation, and Federal Highway Administration set out to demonstrate and document the design and construction of portland cement concrete (PCC) overlays on two-lane roadways wh...

Measuring and Advancing Experimental Design Ability in an Introductory Course without Altering Existing Lab Curriculum†

PubMed Central

Shanks, Ryan A.; Robertson, Chuck L.; Haygood, Christian S.; Herdliksa, Anna M.; Herdliska, Heather R.; Lloyd, Steven A.

2017-01-01

Introductory biology courses provide an important opportunity to prepare students for future courses, yet existing cookbook labs, although important in their own way, fail to provide many of the advantages of semester-long research experiences. Engaging, authentic research experiences aid biology students in meeting many learning goals. Therefore, overlaying a research experience onto the existing lab structure allows faculty to overcome barriers involving curricular change. Here we propose a working model for this overlay design in an introductory biology course and detail a means to conduct this lab with minimal increases in student and faculty workloads. Furthermore, we conducted exploratory factor analysis of the Experimental Design Ability Test (EDAT) and uncovered two latent factors which provide valid means to assess this overlay model’s ability to increase advanced experimental design abilities. In a pre-test/post-test design, we demonstrate significant increases in both basic and advanced experimental design abilities in an experimental and comparison group. We measured significantly higher gains in advanced experimental design understanding in students in the experimental group. We believe this overlay model and EDAT factor analysis contribute a novel means to conduct and assess the effectiveness of authentic research experiences in an introductory course without major changes to the course curriculum and with minimal increases in faculty and student workloads. PMID:28904647

Assessment of asphalt interlayer designed on jointed concrete.

DOT National Transportation Integrated Search

2014-11-01

Reflective cracking in hot mix asphalt (HMA) overlays has been a common cause of poor pavement performance in Iowa for : many years. Reflective cracks commonly occur in HMA overlays when deteriorated portland cement concrete is paved over with : HMA....

Development of improved pavement rehabilitation procedures based on FWD backcalculation.

DOT National Transportation Integrated Search

2015-01-01

Hot Mix Asphalt (HMA) overlays are among the most effective maintenance and rehabilitation : alternatives in improving the structural as well as functional performance of flexible pavements. HMA : overlay design procedures can be based on: (1) engine...

Complete Imageless solution for overlay front-end manufacturing

NASA Astrophysics Data System (ADS)

Herisson, David; LeCacheux, Virginie; Touchet, Mathieu; Vachellerie, Vincent; Lecarpentier, Laurent; Felten, Franck; Polli, Marco

2005-09-01

Imageless option of KLA-Tencor RDM system (Recipe Data Management) is a new method of recipe creation, using only the mask design to define alignment target and measurement parameters. This technique is potentially the easiest tool to improve recipe management of a large amount of products in logic fab. Overlay recipes are created without wafer, by using a synthetic image (copy of gds mask file) for alignment pattern and target design like shape (frame in frame) and size for the measurement. A complete gauge study on critical CMOS 90nm Gate level has been conducted to evaluate reliability and robustness of the imageless recipe. We show that Imageless limits drastically the number of templates used for recipe creation, and improves or maintains measurement capability compare to manual recipe creation (operator dependant). Imageless appears to be a suitable solution for high volume manufacturing, as shown by the results obtained on production lots.

Virtual overlay metrology for fault detection supported with integrated metrology and machine learning

NASA Astrophysics Data System (ADS)

Lee, Hong-Goo; Schmitt-Weaver, Emil; Kim, Min-Suk; Han, Sang-Jun; Kim, Myoung-Soo; Kwon, Won-Taik; Park, Sung-Ki; Ryan, Kevin; Theeuwes, Thomas; Sun, Kyu-Tae; Lim, Young-Wan; Slotboom, Daan; Kubis, Michael; Staecker, Jens

2015-03-01

While semiconductor manufacturing moves toward the 7nm node for logic and 15nm node for memory, an increased emphasis has been placed on reducing the influence known contributors have toward the on product overlay budget. With a machine learning technique known as function approximation, we use a neural network to gain insight to how known contributors, such as those collected with scanner metrology, influence the on product overlay budget. The result is a sufficiently trained function that can approximate overlay for all wafers exposed with the lithography system. As a real world application, inline metrology can be used to measure overlay for a few wafers while using the trained function to approximate overlay vector maps for the entire lot of wafers. With the approximated overlay vector maps for all wafers coming off the track, a process engineer can redirect wafers or lots with overlay signatures outside the standard population to offline metrology for excursion validation. With this added flexibility, engineers will be given more opportunities to catch wafers that need to be reworked, resulting in improved yield. The quality of the derived corrections from measured overlay metrology feedback can be improved using the approximated overlay to trigger, which wafers should or shouldn't be, measured inline. As a development or integration engineer the approximated overlay can be used to gain insight into lots and wafers used for design of experiments (DOE) troubleshooting. In this paper we will present the results of a case study that follows the machine learning function approximation approach to data analysis, with production overlay measured on an inline metrology system at SK hynix.

Backscattered electron simulations to evaluate sensitivity against electron dosage of buried semiconductor features

NASA Astrophysics Data System (ADS)

Mukhtar, Maseeh; Thiel, Bradley

2018-03-01

In fabrication, overlay measurements of semiconductor device patterns have conventionally been performed using optical methods. Beginning with image-based techniques using box-in-box to the more recent diffraction-based overlay (DBO). Alternatively, use of SEM overlay is under consideration for in-device overlay. Two main application spaces are measurement features from multiple mask levels on the same surface and buried features. Modern CD-SEMs are adept at measuring overlay for cases where all features are on the surface. In order to measure overlay of buried features, HV-SEM is needed. Gate-to-fin and BEOL overlay are important use cases for this technique. A JMONSEL simulation exercise was performed for these two cases using 10 nm line/space gratings of graduated increase in depth of burial. Backscattered energy loss results of these simulations were used to calculate the sensitivity measurements of buried features versus electron dosage for an array of electron beam voltages.

Optical DC overlay measurement in the 2nd level process of 65 nm alternating phase shift mask

NASA Astrophysics Data System (ADS)

Ma, Jian; Han, Ke; Lee, Kyung; Korobko, Yulia; Silva, Mary; Chavez, Joas; Irvine, Brian; Henrichs, Sven; Chakravorty, Kishore; Olshausen, Robert; Chandramouli, Mahesh; Mammen, Bobby; Padmanaban, Ramaswamy

2005-11-01

Alternating phase shift mask (APSM) techniques help bridge the significant gap between the lithography wavelength and the patterning of minimum features, specifically, the poly line of 35 nm gate length (1x) in Intel's 65 nm technology. One of key steps in making APSM mask is to pattern to within the design tolerances the 2nd level resist so that the zero-phase apertures will be protected by the resist and the pi-phase apertures will be wide open for quartz etch. The ability to align the 2nd level to the 1st level binary pattern, i.e. the 2nd level overlay capability is very important, so is the capability of measuring the overlay accurately. Poor overlay could cause so-called the encroachment after quartz etch, producing undesired quartz bumps in the pi-apertures or quartz pits in the zero-apertures. In this paper, a simple, low-cost optical setup for the 2nd level DC (develop check) overlay measurements in the high volume manufacturing (HVM) of APSM masks is presented. By removing systematic errors in overlay associated with TIS and MIS (tool-induced shift and Mask-process induced shift), it is shown that this setup is capable of supporting the measurement of DC overlay with a tolerance as small as +/- 25 nm. The outstanding issues, such as DC overlay error component analysis, DC - FC (final check) overlay correlation and the overlay linearity (periphery vs. indie), are discussed.

Evaluation of design and construction issues of thin HMA overlays.

DOT National Transportation Integrated Search

2015-04-01

While the overall implementation of thin HMA overlays in Texas has been successful, some issues need to be addressed: : appropriate blending of SAC A and SAC B aggregate to ensure adequate skid resistance; best practices to achieve adequate bonding :...

Thin overlay guidelines : project selection, design, and construction.

DOT National Transportation Integrated Search

2015-04-01

Thin hot mix asphalt (HMA) overlays are : cost-effective, high-performance maintenance : treatments. They can be laid at 1.0 to 0.5 inches : thick and consist of quality aggregate and binder : materials. The costs are generally more (per ton) : than ...

Evaluation of bonded concrete overlays over asphalt under accelerated loading : research project capsule.

DOT National Transportation Integrated Search

2014-05-01

The overall objective of this research study is to evaluate the structural performance and loadcarrying : capacity of bonded concrete overlay pavement structures through accelerated pavement : testing and document the experience of mix design and con...

Influence of bitumen type on cracking resistance of asphalt mixtures used in pavement overlays

NASA Astrophysics Data System (ADS)

Jaskula, P.; Szydlowski, C.; Stienss, M.

2018-05-01

Cracking is one of the predominant distresses occurring in flexible pavements, especially in old pavements that were rehabilitated with an asphalt overlay. In such cases asphalt mixtures should be designed to ensure high resistance to reflective cracking because new asphalt layers are exposed to existing cracks of the old pavement. The nature of these cracks can be various (transverse, longitudinal as well as crazy cracking). One factor that minimizes this type of distress is the proper mix design process, which should involve selection of specific bitumen binder and mineral mix gradation. However, still there is no universally adopted laboratory test method that would allow to clearly assess resistance of asphalt mixtures to reflective cracking. This paper describes the usage of one of the devices developed to test asphalt mixtures in terms of such distress – Texas Overlay Tester. For this test, samples prepared in laboratory conditions (i.e. compacted with the use of Superpave Gyratory Compactor) as well as obtained in the field (by core drilling) can be used. The results are obtained not only quickly and easily, but also with sufficient repeatability. The described method characterizes both crack initiation and crack propagation properties of asphalt mixtures. In this work one type of mineral mixture was tested with 4 different types of bitumen (one neat bitumen, two ordinary polymer-modified and one polymer-modified with high polymer content). For selected cases extra additives (rubber and loose fibres) were also tested. In total, six asphalt mixtures were tested. A ranking of the used binders was created on the basis of the results in order to conclude which bitumen would ensure the best performance characteristics in terms of reflective cracking. The results have clearly shown that deliberate choice of the binder used in the asphalt mixture for the overlay will significantly improve its reflective cracking resistance or even fatigue resistance.

Overlay improvements using a real time machine learning algorithm

NASA Astrophysics Data System (ADS)

Schmitt-Weaver, Emil; Kubis, Michael; Henke, Wolfgang; Slotboom, Daan; Hoogenboom, Tom; Mulkens, Jan; Coogans, Martyn; ten Berge, Peter; Verkleij, Dick; van de Mast, Frank

2014-04-01

While semiconductor manufacturing is moving towards the 14nm node using immersion lithography, the overlay requirements are tightened to below 5nm. Next to improvements in the immersion scanner platform, enhancements in the overlay optimization and process control are needed to enable these low overlay numbers. Whereas conventional overlay control methods address wafer and lot variation autonomously with wafer pre exposure alignment metrology and post exposure overlay metrology, we see a need to reduce these variations by correlating more of the TWINSCAN system's sensor data directly to the post exposure YieldStar metrology in time. In this paper we will present the results of a study on applying a real time control algorithm based on machine learning technology. Machine learning methods use context and TWINSCAN system sensor data paired with post exposure YieldStar metrology to recognize generic behavior and train the control system to anticipate on this generic behavior. Specific for this study, the data concerns immersion scanner context, sensor data and on-wafer measured overlay data. By making the link between the scanner data and the wafer data we are able to establish a real time relationship. The result is an inline controller that accounts for small changes in scanner hardware performance in time while picking up subtle lot to lot and wafer to wafer deviations introduced by wafer processing.

Design and construction recommendations for thin overlays in Texas.

DOT National Transportation Integrated Search

2012-10-01

Thin HMA overlays, laid at 1.0 inch or thinner, are cost-effective surface maintenance options. The primary focus of this research was : to develop specifications for three such mixes: fine dense-graded mix (fine DGM), fine-graded stone matrix asphal...

CFD-Predicted Tile Heating Bump Factors Due to Tile Overlay Repairs

NASA Technical Reports Server (NTRS)

Lessard, Victor R.

2006-01-01

A Computational Fluid Dynamics investigation of the Orbiter's Tile Overlay Repair (TOR) is performed to assess the aeroheating Damage Assessment Team's (DAT) existing heating correlation method for protuberance interference heating on the surrounding thermal protection system. Aerothermodynamic heating analyses are performed for TORs at the design reference damage locations body points 1800 and 1075 for a Mach 17.9 and a=39deg STS-107 flight trajectory point with laminar flow. Six different cases are considered. The computed peak heating bump factor on the surrounding tiles are below the DAT's heating bump factor values for smooth tile cases. However, for the uneven tiles cases the peak interference heating is shown to be considerably higher than the existing correlation prediction.

Design of ultra high performance concrete as an overlay in pavements and bridge decks.

DOT National Transportation Integrated Search

2014-08-01

The main objective of this research was to develop ultra-high performance concrete (UHPC) as a reliable, economic, low carbon foot : print and durable concrete overlay material that can offer shorter traffic closures due to faster construction. The U...

Visual supports for shared reading with young children: the effect of static overlay design.

PubMed

Wood Jackson, Carla; Wahlquist, Jordan; Marquis, Cassandra

2011-06-01

This study examined the effects of two types of static overlay design (visual scene display and grid display) on 39 children's use of a speech-generating device during shared storybook reading with an adult. This pilot project included two groups: preschool children with typical communication skills (n = 26) and with complex communication needs (n = 13). All participants engaged in shared reading with two books using each visual layout on a speech-generating device (SGD). The children averaged a greater number of activations when presented with a grid display during introductory exploration and free play. There was a large effect of the static overlay design on the number of silent hits, evidencing more silent hits with visual scene displays. On average, the children demonstrated relatively few spontaneous activations of the speech-generating device while the adult was reading, regardless of overlay design. When responding to questions, children with communication needs appeared to perform better when using visual scene displays, but the effect of display condition on the accuracy of responses to wh-questions was not statistically significant. In response to an open ended question, children with communication disorders demonstrated more frequent activations of the SGD using a grid display than a visual scene. Suggestions for future research as well as potential implications for designing AAC systems for shared reading with young children are discussed.

Advanced diffraction-based overlay for double patterning

NASA Astrophysics Data System (ADS)

Li, Jie; Liu, Yongdong; Dasari, Prasad; Hu, Jiangtao; Smith, Nigel; Kritsun, Oleg; Volkman, Catherine

2010-03-01

Diffraction based overlay (DBO) technologies have been developed to address the tighter overlay control challenges as the dimensions of integrated circuit continue to shrink. Several studies published recently have demonstrated that the performance of DBO technologies has the potential to meet the overlay metrology budget for 22nm technology node. However, several hurdles must be cleared before DBO can be used in production. One of the major hurdles is that most DBO technologies require specially designed targets that consist of multiple measurement pads, which consume too much space and increase measurement time. A more advanced spectroscopic ellipsometry (SE) technology-Mueller Matrix SE (MM-SE) is developed to address the challenge. We use a double patterning sample to demonstrate the potential of MM-SE as a DBO candidate. Sample matrix (the matrix that describes the effects of the sample on the incident optical beam) obtained from MM-SE contains up to 16 elements. We show that the Mueller elements from the off-diagonal 2x2 blocks respond to overlay linearly and are zero when overlay errors are absent. This superior property enables empirical DBO (eDBO) using two pads per direction. Furthermore, the rich information in Mueller matrix and its direct response to overlay make it feasible to extract overlay errors from only one pad per direction using modeling approach (mDBO). We here present the Mueller overlay results using both eDBO and mDBO and compare the results with image-based overlay (IBO) and CD-SEM results. We also report the tool induced shifts (TIS) and dynamic repeatability.

A computational system for aerodynamic design and analysis of supersonic aircraft. Part 1: General description and theoretical development

NASA Technical Reports Server (NTRS)

Middleton, W. D.; Lundry, J. L.

1976-01-01

An integrated system of computer programs was developed for the design and analysis of supersonic configurations. The system uses linearized theory methods for the calculation of surface pressures and supersonic area rule concepts in combination with linearized theory for calculation of aerodynamic force coefficients. Interactive graphics are optional at the user's request. Schematics of the program structure and the individual overlays and subroutines are described.

High Cycle Fatigue (HCF) Science and Technology Program 2002 Annual Report

DTIC Science & Technology

2003-08-01

Turbine Engine Airfoils, Phase I 4.3 Probabilistic Design of Turbine Engine Airfoils, Phase II 4.4 Probabilistic Blade Design System 4.5...XTL17/SE2 7.4 Conclusion 8.0 TEST AND EVALUATION 8.1 Characterization Test Protocol 8.2 Demonstration Test Protocol 8.3 Development of Multi ...transparent and opaque overlays for processing. The objective of the SBIR Phase I program was to identify and evaluate promising methods for

0-6742 : evaluation of design and construction issues of thin HMA overlays.

DOT National Transportation Integrated Search

2014-08-01

Thin hot-mix asphalt (HMA) overlays, placed : between 1.25 to 0.5 inches, have quickly become : a go-to maintenance treatment in Texas. While : implementation around the state is proving : successful, a few issues needed to be addressed: : 1. The una...

Light emitting ceramic device and method for fabricating the same

DOEpatents

Valentine, Paul; Edwards, Doreen D.; Walker Jr., William John; Slack, Lyle H.; Brown, Wayne Douglas; Osborne, Cathy; Norton, Michael; Begley, Richard

2004-11-30

A light-emitting ceramic based panel, hereafter termed "electroceramescent" panel, and alternative methods of fabrication for the same are claimed. The electroceramescent panel is formed on a substrate providing mechanical support as well as serving as the base electrode for the device. One or more semiconductive ceramic layers directly overlay the substrate, and electrical conductivity and ionic diffusion are controlled. Light emitting regions overlay the semiconductive ceramic layers, and said regions consist sequentially of a layer of a ceramic insulation layer and an electroluminescent layer, comprised of doped phosphors or the equivalent. One or more conductive top electrode layers having optically transmissive areas overlay the light emitting regions, and a multi-layered top barrier cover comprising one or more optically transmissive non-combustible insulation layers overlay said top electrode regions.

An Appraisal of the Irlen Technique of Correcting Reading Disorders Using Tinted Overlays and Tinted Lenses.

ERIC Educational Resources Information Center

Solan, Harold A.

1990-01-01

The article reviews three studies (EC 600 064-066) evaluating the effectiveness of using Irlen tinted lenses or overlays with reading-disabled persons. It is concluded that carefully designed and controlled studies do not currently lend support to the Irlen hypothesis. (DB)

Accelerated testing for studying pavement design and performance (FY 2004) : thin bonded rigid overlay on PCCP and HMA (CISL experiment no. 13).

DOT National Transportation Integrated Search

2009-03-01

The thirteenth full-scale Accelerated Pavement Test (APT) experiment at the Civil Infrastructure Laboratory (CISL) : of Kansas State University aimed to determine the response and the failure mode of thin concrete overlays. Four : pavement structures...

Asphalt overlay cost-effectiveness : Manitoba TGS and Minnesota SPS-5 projects 10-year ranking of treatments (1989-1999)

DOT National Transportation Integrated Search

2000-10-01

This report reviews Manitoba's and Minnesota's Specific Pavement Studies (SPS-5) projects. The studies focus on investigating the performance of hot mix asphalt (HMA) overlays on HMA pavements and involve nine core test sections. The SPS-5 design var...

SEM based overlay measurement between resist and buried patterns

NASA Astrophysics Data System (ADS)

Inoue, Osamu; Okagawa, Yutaka; Hasumi, Kazuhisa; Shao, Chuanyu; Leray, Philippe; Lorusso, Gian; Baudemprez, Bart

2016-03-01

With the continuous shrink in pattern size and increased density, overlay control has become one of the most critical issues in semiconductor manufacturing. Recently, SEM based overlay of AEI (After Etch Inspection) wafer has been used for reference and optimization of optical overlay (both Image Based Overlay (IBO) and Diffraction Based Overlay (DBO)). Overlay measurement at AEI stage contributes monitor and forecast the yield after formation by etch and calibrate optical measurement tools. however those overlay value seems difficult directly for feedback to a scanner. Therefore, there is a clear need to have SEM based overlay measurements of ADI (After Develop Inspection) wafers in order to serve as reference for optical overlay and make necessary corrections before wafers go to etch. Furthermore, to make the corrections as accurate as possible, actual device like feature dimensions need to be measured post ADI. This device size measurement is very unique feature of CDSEM , which can be measured with smaller area. This is currently possible only with the CD-SEM. This device size measurement is very unique feature of CD-SEM , which can be measured with smaller area. In this study, we assess SEM based overlay measurement of ADI and AEI wafer by using a sample from an N10 process flow. First, we demonstrate SEM based overlay performance at AEI by using dual damascene process for Via 0 (V0) and metal 1 (M1) layer. We also discuss the overlay measurements between litho-etch-litho stages of a triple patterned M1 layer and double pattern V0. Second, to illustrate the complexities in image acquisition and measurement we will measure overlay between M1B resist and buried M1A-Hard mask trench. Finally, we will show how high accelerating voltage can detect buried pattern information by BSE (Back Scattering Electron). In this paper we discuss the merits of this method versus standard optical metrology based corrections.

The performances of different overlay mark types at 65nm node on 300-mm wafers

NASA Astrophysics Data System (ADS)

Tseng, H. T.; Lin, Ling-Chieh; Huang, I. H.; Lin, Benjamin S.; Huang, Chin-Chou K.; Huang, Chien-Jen

2005-05-01

The integrated circuit (IC) manufacturing factories have measured overlay with conventional "box-in-box" (BiB) or "frame-in-frame" (FiF) structures for many years. Since UMC played as a roll of world class IC foundry service provider, tighter and tighter alignment accuracy specs need to be achieved from generation to generation to meet any kind of customers' requirement, especially according to International Technology Roadmap for Semiconductors (ITRS) 2003 METROLOGY section1. The process noises resulting from dishing, overlay mark damaging by chemical mechanism polishing (CMP), and the variation of film thickness during deposition are factors which can be very problematic in mark alignment. For example, the conventional "box-in-box" overlay marks could be damaged easily by CMP, because the less local pattern density and wide feature width of the box induce either dishing or asymmetric damages for the measurement targets, which will make the overlay measurement varied and difficult. After Advanced Imaging Metrology (AIM) overlay targets was introduced by KLA-Tencor, studies in the past shown AIM was more robust in overlay metrology than conventional FiF or BiB targets. In this study, the applications of AIM overlay marks under different process conditions will be discussed and compared with the conventional overlay targets. To evaluate the overlay mark performance against process variation on 65nm technology node in 300-mm wafer, three critical layers were chosen in this study. These three layers were Poly, Contact, and Cu-Metal. The overlay targets used for performance comparison were BiB and Non-Segmented AIM (NS AIM) marks. We compared the overlay mark performance on two main areas. The first one was total measurement uncertainty (TMU)3 related items that include Tool Induced Shift (TIS) variability, precision, and matching. The other area is the target robustness against process variations. Based on the present study AIM mark demonstrated an equal or better performance in the TMU related items under our process conditions. However, when non-optimized tungsten CMP was introduced in the tungsten contact process, due to the dense grating line structure design, we found that AIM mark was much more robust than BiB overlay target.

Improving concrete overlay construction.

DOT National Transportation Integrated Search

2010-03-01

Several road construction projects involving concrete overlays at the state and county levels in Iowa in 2009 were studied for : construction techniques and methods. The projects that were evaluated consisted of sites in four Iowa counties: Osceola, ...

Longer Lasting Bridge Deck Overlays

DOT National Transportation Integrated Search

2018-04-01

The objective of this report is to determine the most effective method for bridge deck overlay construction and repair by assessing current practices; examining new products and technologies; and reviewing NCHRP (National Cooperative Highway Research...

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

NASA Astrophysics Data System (ADS)

Haring, Martijn T.; Liv, Nalan; Zonnevylle, A. Christiaan; Narvaez, Angela C.; Voortman, Lenard M.; Kruit, Pieter; Hoogenboom, Jacob P.

2017-03-01

In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample.

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers.

PubMed

Haring, Martijn T; Liv, Nalan; Zonnevylle, A Christiaan; Narvaez, Angela C; Voortman, Lenard M; Kruit, Pieter; Hoogenboom, Jacob P

2017-03-02

In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample.

Automated sub-5 nm image registration in integrated correlative fluorescence and electron microscopy using cathodoluminescence pointers

PubMed Central

Haring, Martijn T.; Liv, Nalan; Zonnevylle, A. Christiaan; Narvaez, Angela C.; Voortman, Lenard M.; Kruit, Pieter; Hoogenboom, Jacob P.

2017-01-01

In the biological sciences, data from fluorescence and electron microscopy is correlated to allow fluorescence biomolecule identification within the cellular ultrastructure and/or ultrastructural analysis following live-cell imaging. High-accuracy (sub-100 nm) image overlay requires the addition of fiducial markers, which makes overlay accuracy dependent on the number of fiducials present in the region of interest. Here, we report an automated method for light-electron image overlay at high accuracy, i.e. below 5 nm. Our method relies on direct visualization of the electron beam position in the fluorescence detection channel using cathodoluminescence pointers. We show that image overlay using cathodoluminescence pointers corrects for image distortions, is independent of user interpretation, and does not require fiducials, allowing image correlation with molecular precision anywhere on a sample. PMID:28252673

Advancements of diffraction-based overlay metrology for double patterning

NASA Astrophysics Data System (ADS)

Li, Jie; Kritsun, Oleg; Liu, Yongdong; Dasari, Prasad; Weher, Ulrich; Volkman, Catherine; Mazur, Martin; Hu, Jiangtao

2011-03-01

As the dimensions of integrated circuit continue to shrink, diffraction based overlay (DBO) technologies have been developed to address the tighter overlay control challenges. Previously data of high accuracy and high precision were reported for litho-etch-litho-etch double patterning (DP) process using normal incidence spectroscopic reflectometry on specially designed targets composed of 1D gratings in x and y directions. Two measurement methods, empirical algorithm (eDBO) using four pads per direction (2x4 target) and modeling based algorithm (mDBO) using two pads per direction (2x2 target) were performed. In this work, we apply DBO techniques to measure overlay errors for a different DP process, litho-freeze-litho-etch process. We explore the possibility of further reducing number of pads in a DBO target using mDBO. For standard targets composed of 1D gratings, we reported results for eDBO 2x4 targets, mDBO 2x2 targets, and mDBO 2x1 target. The results of all three types of targets are comparable in terms of accuracy, dynamic precision, and TIS. TMU (not including tool matching) is less than 0.1nm. In addition, we investigated the possibility of measuring overlay with one single pad that contains 2D gratings. We achieved good correlation to blossom measurements. TMU (not including tool matching) is ~ 0.2nm. To our best knowledge, this is the first time that DBO results are reported on a single pad. eDBO allows quick recipe setup but takes more space and measurement time. Although mDBO needs details of optical properties and modeling, it offers smaller total target size and much faster throughput, which is important in high volume manufacturing environment.

Holistic metrology qualification extension and its application to characterize overlay targets with asymmetric effects

NASA Astrophysics Data System (ADS)

Dos Santos Ferreira, Olavio; Sadat Gousheh, Reza; Visser, Bart; Lie, Kenrick; Teuwen, Rachel; Izikson, Pavel; Grzela, Grzegorz; Mokaberi, Babak; Zhou, Steve; Smith, Justin; Husain, Danish; Mandoy, Ram S.; Olvera, Raul

2018-03-01

Ever increasing need for tighter on-product overlay (OPO), as well as enhanced accuracy in overlay metrology and methodology, is driving semiconductor industry's technologists to innovate new approaches to OPO measurements. In case of High Volume Manufacturing (HVM) fabs, it is often critical to strive for both accuracy and robustness. Robustness, in particular, can be challenging in metrology since overlay targets can be impacted by proximity of other structures next to the overlay target (asymmetric effects), as well as symmetric stack changes such as photoresist height variations. Both symmetric and asymmetric contributors have impact on robustness. Furthermore, tweaking or optimizing wafer processing parameters for maximum yield may have an adverse effect on physical target integrity. As a result, measuring and monitoring physical changes or process abnormalities/artefacts in terms of new Key Performance Indicators (KPIs) is crucial for the end goal of minimizing true in-die overlay of the integrated circuits (ICs). IC manufacturing fabs often relied on CD-SEM in the past to capture true in-die overlay. Due to destructive and intrusive nature of CD-SEMs on certain materials, it's desirable to characterize asymmetry effects for overlay targets via inline KPIs utilizing YieldStar (YS) metrology tools. These KPIs can also be integrated as part of (μDBO) target evaluation and selection for final recipe flow. In this publication, the Holistic Metrology Qualification (HMQ) flow was extended to account for process induced (asymmetric) effects such as Grating Imbalance (GI) and Bottom Grating Asymmetry (BGA). Local GI typically contributes to the intrafield OPO whereas BGA typically impacts the interfield OPO, predominantly at the wafer edge. Stack height variations highly impact overlay metrology accuracy, in particular in case of multi-layer LithoEtch Litho-Etch (LELE) overlay control scheme. Introducing a GI impact on overlay (in nm) KPI check quantifies the grating imbalance impact on overlay, whereas optimizing for accuracy using self-reference captures the bottom grating asymmetry effect. Measuring BGA after each process step before exposure of the top grating helps to identify which specific step introduces the asymmetry in the bottom grating. By evaluating this set of KPI's to a BEOL LELE overlay scheme, we can enhance robustness of recipe selection and target selection. Furthermore, these KPIs can be utilized to highlight process and equipment abnormalities. In this work, we also quantified OPO results with a self-contained methodology called Triangle Method. This method can be utilized for LELE layers with a common target and reference. This allows validating general μDBO accuracy, hence reducing the need for CD-SEM verification.

Three projects using 4.75 mm. superpave HMA on Route1A, Route 2A, & Route 27.

DOT National Transportation Integrated Search

2012-04-01

In July & August, 2010, MaineDOT applied 4.75 mm. (5/8 inch) Superpave designed hot mix asphalt : overlays in three locations. These overlay projects were on Route 1A, 2A, and 27, located in Forkstown, : New Portland, and Limestone, respectively. Pro...

Achieving optimum diffraction based overlay performance

NASA Astrophysics Data System (ADS)

Leray, Philippe; Laidler, David; Cheng, Shaunee; Coogans, Martyn; Fuchs, Andreas; Ponomarenko, Mariya; van der Schaar, Maurits; Vanoppen, Peter

2010-03-01

Diffraction Based Overlay (DBO) metrology has been shown to have significantly reduced Total Measurement Uncertainty (TMU) compared to Image Based Overlay (IBO), primarily due to having no measurable Tool Induced Shift (TIS). However, the advantages of having no measurable TIS can be outweighed by increased susceptibility to WIS (Wafer Induced Shift) caused by target damage, process non-uniformities and variations. The path to optimum DBO performance lies in having well characterized metrology targets, which are insensitive to process non-uniformities and variations, in combination with optimized recipes which take advantage of advanced DBO designs. In this work we examine the impact of different degrees of process non-uniformity and target damage on DBO measurement gratings and study their impact on overlay measurement accuracy and precision. Multiple wavelength and dual polarization scatterometry are used to characterize the DBO design performance over the range of process variation. In conclusion, we describe the robustness of DBO metrology to target damage and show how to exploit the measurement capability of a multiple wavelength, dual polarization scatterometry tool to ensure the required measurement accuracy for current and future technology nodes.

Robotic weld overlay coatings for erosion control

NASA Astrophysics Data System (ADS)

The erosion of materials by the impact of solid particles has received increasing attention during the past twenty years. Recently, research has been initiated with the event of advanced coal conversion processes in which erosion plays an important role. The resulting damage, termed Solid Particle Erosion (SPE), is of concern primarily because of the significantly increased operating costs which result in material failures. Reduced power plant efficiency due to solid particle erosion of boiler tubes and waterfalls has led to various methods to combat SPE. One method is to apply coatings to the components subjected to erosive environments. Protective weld overlay coatings are particularly advantageous in terms of coating quality. The weld overlay coatings are essentially immune to spallation due to a strong metallurgical bond with the substrate material. By using powder mixtures, multiple alloys can be mixed in order to achieve the best performance in an erosive environment. However, a review of the literature revealed a lack of information on weld overlay coating performance in erosive environments which makes the selection of weld overlay alloys a difficult task. The objective of this project is to determine the effects of weld overlay coating composition and microstructure on erosion resistance. These results will lead to a better understanding of erosion mitigation in CFB's.

Evaluating diffraction-based overlay

NASA Astrophysics Data System (ADS)

Li, Jie; Tan, Asher; Jung, JinWoo; Goelzer, Gary; Smith, Nigel; Hu, Jiangtao; Ham, Boo-Hyun; Kwak, Min-Cheol; Kim, Cheol-Hong; Nam, Suk-Woo

2012-03-01

We evaluate diffraction-based overlay (DBO) metrology using two test wafers. The test wafers have different film stacks designed to test the quality of DBO data under a range of film conditions. We present DBO results using traditional empirical approach (eDBO). eDBO relies on linear response of the reflectance with respect to the overlay displacement within a small range. It requires specially designed targets that consist of multiple pads with programmed shifts. It offers convenience of quick recipe setup since there is no need to establish a model. We measure five DBO targets designed with different pitches and programmed shifts. The correlations of five eDBO targets and the correlation of eDBO to image-based overlay are excellent. The targets of 800nm and 600nm pitches have better dynamic precision than targets of 400nm pitch, which agrees with simulated results on signal/noise ratio. 3σ of less than 0.1nm is achieved for both wafers using the best configured targets. We further investigate the linearity assumption of eDBO algorithm. Simulation results indicate that as the pitch of DBO targets gets smaller, the nonlinearity error, i.e., the error in the overlay measurement results caused by deviation from ideal linear response, becomes bigger. We propose a nonlinearity correction (NLC) by including higher order terms in the optical response. The new algorithm with NLC improves measurement consistency for DBO targets of same pitch but different programmed shift, due to improved accuracy. The results from targets with different pitches, however, are improved marginally, indicating the presence of other error sources.

Overlay Tolerances For VLSI Using Wafer Steppers

NASA Astrophysics Data System (ADS)

Levinson, Harry J.; Rice, Rory

1988-01-01

In order for VLSI circuits to function properly, the masking layers used in the fabrication of those devices must overlay each other to within the manufacturing tolerance incorporated in the circuit design. The capabilities of the alignment tools used in the masking process determine the overlay tolerances to which circuits can be designed. It is therefore of considerable importance that these capabilities be well characterized. Underestimation of the overlay accuracy results in unnecessarily large devices, resulting in poor utilization of wafer area and possible degradation of device performance. Overestimation will result in significant yield loss because of the failure to conform to the tolerances of the design rules. The proper methodology for determining the overlay capabilities of wafer steppers, the most commonly used alignment tool for the production of VLSI circuits, is the subject of this paper. Because cost-effective manufacturing process technology has been the driving force of VLSI, the impact on productivity is a primary consideration in all discussions. Manufacturers of alignment tools advertise the capabilities of their equipment. It is notable that no manufacturer currently characterizes his aligners in a manner consistent with the requirements of producing very large integrated circuits, as will be discussed. This has resulted in the situation in which the evaluation and comparison of the capabilities of alignment tools require the attention of a lithography specialist. Unfortunately, lithographic capabilities must be known by many other people, particularly the circuit designers and the managers responsible for the financial consequences of the high prices of modern alignment tools. All too frequently, the designer or manager is confronted with contradictory data, one set coming from his lithography specialist, and the other coming from a sales representative of an equipment manufacturer. Since the latter generally attempts to make his merchandise appear as attractive as possible, the lithographer is frequently placed in the position of having to explain subtle issues in order to justify his decisions. It is the purpose of this paper to provide that explanation.

Driving imaging and overlay performance to the limits with advanced lithography optimization

NASA Astrophysics Data System (ADS)

Mulkens, Jan; Finders, Jo; van der Laan, Hans; Hinnen, Paul; Kubis, Michael; Beems, Marcel

2012-03-01

Immersion lithography is being extended to 22-nm and even below. Next to generic scanner system improvements, application specific solutions are needed to follow the requirements for CD control and overlay. Starting from the performance budgets, this paper discusses how to improve (in volume manufacturing environment) CDU towards 1-nm and overlay towards 3-nm. The improvements are based on deploying the actuator capabilities of the immersion scanner. The latest generation immersion scanners have extended the correction capabilities for overlay and imaging, offering freeform adjustments of lens, illuminator and wafer grid. In order to determine the needed adjustments the recipe generation per user application is based on a combination wafer metrology data and computational lithography methods. For overlay, focus and CD metrology we use an angle resolved optical scatterometer.

Unique method for controlling device level overlay with high-NA optical overlay technique using YieldStar in a DRAM HVM environment

NASA Astrophysics Data System (ADS)

Park, Dong-Kiu; Kim, Hyun-Sok; Seo, Moo-Young; Ju, Jae-Wuk; Kim, Young-Sik; Shahrjerdy, Mir; van Leest, Arno; Soco, Aileen; Miceli, Giacomo; Massier, Jennifer; McNamara, Elliott; Hinnen, Paul; Böcker, Paul; Oh, Nang-Lyeom; Jung, Sang-Hoon; Chai, Yvon; Lee, Jun-Hyung

2018-03-01

This paper demonstrates the improvement using the YieldStar S-1250D small spot, high-NA, after-etch overlay in-device measurements in a DRAM HVM environment. It will be demonstrated that In-device metrology (IDM) captures after-etch device fingerprints more accurately compared to the industry-standard CDSEM. Also, IDM measurements (acquiring both CD and overlay) can be executed significantly faster increasing the wafer sampling density that is possible within a realistic metrology budget. The improvements to both speed and accuracy open the possibility of extended modeling and correction capabilities for control. The proof-book data of this paper shows a 36% improvement of device overlay after switching to control in a DRAM HVM environment using indevice metrology.

SU-G-206-17: RadShield: Semi-Automated Shielding Design for CT Using NCRP 147 and Isodose Curves

DOE Office of Scientific and Technical Information (OSTI.GOV)

DeLorenzo, M; Rutel, I; Yang, K

2016-06-15

Purpose: Computed tomography (CT) exam rooms are shielded more quickly and accurately compared to manual calculations using RadShield, a semi-automated diagnostic shielding software package. Last year, we presented RadShield’s approach to shielding radiographic and fluoroscopic rooms calculating air kerma rate and barrier thickness at many points on the floor plan and reporting the maximum values for each barrier. RadShield has now been expanded to include CT shielding design using not only NCRP 147 methodology but also by overlaying vendor provided isodose curves onto the floor plan. Methods: The floor plan image is imported onto the RadShield workspace to serve asmore » a template for drawing barriers, occupied regions and CT locations. SubGUIs are used to set design goals, occupancy factors, workload, and overlay isodose curve files. CTDI and DLP methods are solved following NCRP 147. RadShield’s isodose curve method employs radial scanning to extract data point sets to fit kerma to a generalized power law equation of the form K(r) = ar^b. RadShield’s semiautomated shielding recommendations were compared against a board certified medical physicist’s design using dose length product (DLP) and isodose curves. Results: The percentage error found between the physicist’s manual calculation and RadShield’s semi-automated calculation of lead barrier thickness was 3.42% and 21.17% for the DLP and isodose curve methods, respectively. The medical physicist’s selection of calculation points for recommending lead thickness was roughly the same as those found by RadShield for the DLP method but differed greatly using the isodose method. Conclusion: RadShield improves accuracy in calculating air-kerma rate and barrier thickness over manual calculations using isodose curves. Isodose curves were less intuitive and more prone to error for the physicist than inverse square methods. RadShield can now perform shielding design calculations for general scattering bodies for which isodose curves are provided.« less

SU-F-P-53: RadShield: Semi-Automated Shielding Design for CT Using NCRP 147 and Isodose Curves

DOE Office of Scientific and Technical Information (OSTI.GOV)

DeLorenzo, M; Rutel, I; Wu, D

Purpose: Computed tomography (CT) exam rooms are shielded more quickly and accurately compared to manual calculations using RadShield, a semi-automated diagnostic shielding software package. Last year, we presented RadShield’s approach to shielding radiographic and fluoroscopic rooms calculating air kerma rate and barrier thickness at many points on the floor plan and reporting the maximum values for each barrier. RadShield has now been expanded to include CT shielding design using not only NCRP 147 methodology but also by overlaying vendor provided isodose curves onto the floor plan. Methods: The floor plan image is imported onto the RadShield workspace to serve asmore » a template for drawing barriers, occupied regions and CT locations. SubGUIs are used to set design goals, occupancy factors, workload, and overlay isodose curve files. CTDI and DLP methods are solved following NCRP 147. RadShield’s isodose curve method employs radial scanning to extract data point sets to fit kerma to a generalized power law equation of the form K(r) = ar^b. RadShield’s semi-automated shielding recommendations were compared against a board certified medical physicist’s design using dose length product (DLP) and isodose curves. Results: The percentage error found between the physicist’s manual calculation and RadShield’s semi-automated calculation of lead barrier thickness was 3.42% and 21.17% for the DLP and isodose curve methods, respectively. The medical physicist’s selection of calculation points for recommending lead thickness was roughly the same as those found by RadShield for the DLP method but differed greatly using the isodose method. Conclusion: RadShield improves accuracy in calculating air-kerma rate and barrier thickness over manual calculations using isodose curves. Isodose curves were less intuitive and more prone to error for the physicist than inverse square methods. RadShield can now perform shielding design calculations for general scattering bodies for which isodose curves are provided.« less

High order field-to-field corrections for imaging and overlay to achieve sub 20-nm lithography requirements

NASA Astrophysics Data System (ADS)

Mulkens, Jan; Kubis, Michael; Hinnen, Paul; de Graaf, Roelof; van der Laan, Hans; Padiy, Alexander; Menchtchikov, Boris

2013-04-01

Immersion lithography is being extended to the 20-nm and 14-nm node and the lithography performance requirements need to be tightened further to enable this shrink. In this paper we present an integral method to enable high-order fieldto- field corrections for both imaging and overlay, and we show that this method improves the performance with 20% - 50%. The lithography architecture we build for these higher order corrections connects the dynamic scanner actuators with the angle resolved scatterometer via a separate application server. Improvements of CD uniformity are based on enabling the use of freeform intra-field dose actuator and field-to-field control of focus. The feedback control loop uses CD and focus targets placed on the production mask. For the overlay metrology we use small in-die diffraction based overlay targets. Improvements of overlay are based on using the high order intra-field correction actuators on a field-tofield basis. We use this to reduce the machine matching error, extending the heating control and extending the correction capability for process induced errors.

Assessment of the Potential for Color Overlays to Enhance the Reading Skills of Enlisted Navy Recruits

DTIC Science & Technology

2006-07-30

as an intervention . Readers with MIS symptoms read significantly faster with their chosen overlay than without it. These findings justify further...recent years, the techniques for routine diagnosis and effective intervention methods for MIS have been improved and developed. Although Irlen is...The British Royal Navy, for example, screens for MIS on a case-by-case basis and provides overlays and filters as intervention . Furthermore

Diffraction-based overlay measurement on dedicated mark using rigorous modeling method

NASA Astrophysics Data System (ADS)

Lu, Hailiang; Wang, Fan; Zhang, Qingyun; Chen, Yonghui; Zhou, Chang

2012-03-01

Diffraction Based Overlay (DBO) is widely evaluated by numerous authors, results show DBO can provide better performance than Imaging Based Overlay (IBO). However, DBO has its own problems. As well known, Modeling based DBO (mDBO) faces challenges of low measurement sensitivity and crosstalk between various structure parameters, which may result in poor accuracy and precision. Meanwhile, main obstacle encountered by empirical DBO (eDBO) is that a few pads must be employed to gain sufficient information on overlay-induced diffraction signature variations, which consumes more wafer space and costs more measuring time. Also, eDBO may suffer from mark profile asymmetry caused by processes. In this paper, we propose an alternative DBO technology that employs a dedicated overlay mark and takes a rigorous modeling approach. This technology needs only two or three pads for each direction, which is economic and time saving. While overlay measurement error induced by mark profile asymmetry being reduced, this technology is expected to be as accurate and precise as scatterometry technologies.

Three-dimensional reconstruction from serial sections in PC-Windows platform by using 3D_Viewer.

PubMed

Xu, Yi-Hua; Lahvis, Garet; Edwards, Harlene; Pitot, Henry C

2004-11-01

Three-dimensional (3D) reconstruction from serial sections allows identification of objects of interest in 3D and clarifies the relationship among these objects. 3D_Viewer, developed in our laboratory for this purpose, has four major functions: image alignment, movie frame production, movie viewing, and shift-overlay image generation. Color images captured from serial sections were aligned; then the contours of objects of interest were highlighted in a semi-automatic manner. These 2D images were then automatically stacked at different viewing angles, and their composite images on a projected plane were recorded by an image transform-shift-overlay technique. These composition images are used in the object-rotation movie show. The design considerations of the program and the procedures used for 3D reconstruction from serial sections are described. This program, with a digital image-capture system, a semi-automatic contours highlight method, and an automatic image transform-shift-overlay technique, greatly speeds up the reconstruction process. Since images generated by 3D_Viewer are in a general graphic format, data sharing with others is easy. 3D_Viewer is written in MS Visual Basic 6, obtainable from our laboratory on request.

Microeconomics-based resource allocation in overlay networks by using non-strategic behavior modeling

NASA Astrophysics Data System (ADS)

Analoui, Morteza; Rezvani, Mohammad Hossein

2011-01-01

Behavior modeling has recently been investigated for designing self-organizing mechanisms in the context of communication networks in order to exploit the natural selfishness of the users with the goal of maximizing the overall utility. In strategic behavior modeling, the users of the network are assumed to be game players who seek to maximize their utility with taking into account the decisions that the other players might make. The essential difference between the aforementioned researches and this work is that it incorporates the non-strategic decisions in order to design the mechanism for the overlay network. In this solution concept, the decisions that a peer might make does not affect the actions of the other peers at all. The theory of consumer-firm developed in microeconomics is a model of the non-strategic behavior that we have adopted in our research. Based on it, we have presented distributed algorithms for peers' "joining" and "leaving" operations. We have modeled the overlay network as a competitive economy in which the content provided by an origin server can be viewed as commodity and the origin server and the peers who multicast the content to their downside are considered as the firms. On the other hand, due to the dual role of the peers in the overlay network, they can be considered as the consumers as well. On joining to the overlay economy, each peer is provided with an income and tries to get hold of the service regardless to the behavior of the other peers. We have designed the scalable algorithms in such a way that the existence of equilibrium price (known as Walrasian equilibrium price) is guaranteed.

Augmented reality building operations tool

DOEpatents

Brackney, Larry J.

2014-09-09

A method (700) for providing an augmented reality operations tool to a mobile client (642) positioned in a building (604). The method (700) includes, with a server (660), receiving (720) from the client (642) an augmented reality request for building system equipment (612) managed by an energy management system (EMS) (620). The method (700) includes transmitting (740) a data request for the equipment (612) to the EMS (620) and receiving (750) building management data (634) for the equipment (612). The method (700) includes generating (760) an overlay (656) with an object created based on the building management data (634), which may be sensor data, diagnostic procedures, or the like. The overlay (656) is configured for concurrent display on a display screen (652) of the client (642) with a real-time image of the building equipment (612). The method (700) includes transmitting (770) the overlay (656) to the client (642).

Better Ohmic Contacts For InP Semiconductor Devices

NASA Technical Reports Server (NTRS)

Weizer, Victor G.; Fatemi, Navid S.

1995-01-01

Four design modifications enable fabrication of improved ohmic contacts on InP-based semiconductor devices. First modification consists of insertion of layer of gold phosphide between n-doped InP and metal or other overlayer of contact material. Second, includes first modification plus use of particular metal overlayer to achieve very low contact resistivities. Third, also involves deposition of Au(2)P(3) interlayer; in addition, refractory metal (W or Ta) deposited to form contact overlayer. In fourth, contact layer of Auln alloy deposited directly on InP. Improved contacts exhibit low electrical resistances and fabricated without exposing devices to destructive predeposition or postdeposition treatments.

Hand forces exerted by long-term care staff when pushing wheelchairs on compliant and non-compliant flooring.

PubMed

Lachance, Chantelle C; Korall, Alexandra M B; Russell, Colin M; Feldman, Fabio; Robinovitch, Stephen N; Mackey, Dawn C

2018-09-01

Purpose-designed compliant flooring and carpeting have been promoted as a means for reducing fall-related injuries in high-risk environments, such as long-term care. However, it is not known whether these surfaces influence the forces that long-term care staff exert when pushing residents in wheelchairs. We studied 14 direct-care staff who pushed a loaded wheelchair instrumented with a triaxial load cell to test the effects on hand force of flooring overlay (vinyl versus carpet) and flooring subfloor (concrete versus compliant rubber [brand: SmartCells]). During straight-line pushing, carpet overlay increased initial and sustained hand forces compared to vinyl overlay by 22-49% over a concrete subfloor and by 8-20% over a compliant subfloor. Compliant subflooring increased initial and sustained hand forces compared to concrete subflooring by 18-31% when under a vinyl overlay. In contrast, compliant flooring caused no change in initial or sustained hand forces compared to concrete subflooring when under a carpet overlay. Copyright © 2018 Elsevier Ltd. All rights reserved.

A study and simulation of the impact of high-order aberrations to overlay error distribution

NASA Astrophysics Data System (ADS)

Sun, G.; Wang, F.; Zhou, C.

2011-03-01

With reduction of design rules, a number of corresponding new technologies, such as i-HOPC, HOWA and DBO have been proposed and applied to eliminate overlay error. When these technologies are in use, any high-order error distribution needs to be clearly distinguished in order to remove the underlying causes. Lens aberrations are normally thought to mainly impact the Matching Machine Overlay (MMO). However, when using Image-Based overlay (IBO) measurement tools, aberrations become the dominant influence on single machine overlay (SMO) and even on stage repeatability performance. In this paper, several measurements of the error distributions of the lens of SMEE SSB600/10 prototype exposure tool are presented. Models that characterize the primary influence from lens magnification, high order distortion, coma aberration and telecentricity are shown. The contribution to stage repeatability (as measured with IBO tools) from the above errors was predicted with simulator and compared to experiments. Finally, the drift of every lens distortion that impact to SMO over several days was monitored and matched with the result of measurements.

Spray method for recovery of heat-injured Salmonella Typhimurium and Listeria monocytogenes.

PubMed

Back, Kyeong-Hwan; Kim, Sang-Oh; Park, Ki-Hwan; Chung, Myung-Sub; Kang, Dong-Hyun

2012-10-01

Selective agar is inadequate for supporting recovery of injured cells. During risk assessment of certain foods, both injured and noninjured cells must be enumerated. In this study, a new method (agar spray method) for recovering sublethally heat-injured microorganisms was developed and used for recovery of heat-injured Salmonella Typhimurium and Listeria monocytogenes. Molten selective agar was applied as an overlay to presolidified nonselective tryptic soy agar (TSA) by spray application. Heat-injured cells (55°C for 10 min in 0.1% peptone water or 55°C for 15 min in sterilized skim milk) were inoculated directly onto solidified TSA. After a 2-h incubation period for cell repair, selective agar was applied to the TSA surface with a sprayer, and the plates were incubated. The recovery rate for heat-injured Salmonella Typhimurium and L. monocytogenes with the spray method was compared with the corresponding rates associated with TSA alone, selective media alone, and the conventional overlay method (selective agar poured on top of resuscitated cells grown on TSA and incubated for 2 h). No significant differences (P > 0.05) were found in pathogen recovery obtained with TSA, the overlay method, and the spray method. However, a lower recovery rate (P < 0.05) was obtained for isolation of injured cells on selective media. Overall, these results indicate that the agar spray method is an acceptable alternative to the conventional overlay method and is a simpler and more convenient approach to recovery and detection of injured cells.

Risk management algorithm for rear-side collision avoidance using a combined steering torque overlay and differential braking

NASA Astrophysics Data System (ADS)

Lee, Junyung; Yi, Kyongsu; Yoo, Hyunjae; Chong, Hyokjin; Ko, Bongchul

2015-06-01

This paper describes a risk management algorithm for rear-side collision avoidance. The proposed risk management algorithm consists of a supervisor and a coordinator. The supervisor is designed to monitor collision risks between the subject vehicle and approaching vehicle in the adjacent lane. An appropriate criterion of intervention, which satisfies high acceptance to drivers through the consideration of a realistic traffic, has been determined based on the analysis of the kinematics of the vehicles in longitudinal and lateral directions. In order to assist the driver actively and increase driver's safety, a coordinator is designed to combine lateral control using a steering torque overlay by motor-driven power steering and differential braking by vehicle stability control. In order to prevent the collision while limiting actuator's control inputs and vehicle dynamics to safe values for the assurance of the driver's comfort, the Lyapunov theory and linear matrix inequalities based optimisation methods have been used. The proposed risk management algorithm has been evaluated via simulation using CarSim and MATLAB/Simulink.

64nm pitch metal1 double patterning metrology: CD and OVL control by SEMCD, image based overlay and diffraction based overlay

NASA Astrophysics Data System (ADS)

Ducoté, Julien; Dettoni, Florent; Bouyssou, Régis; Le-Gratiet, Bertrand; Carau, Damien; Dezauzier, Christophe

2015-03-01

Patterning process control of advanced nodes has required major changes over the last few years. Process control needs of critical patterning levels since 28nm technology node is extremely aggressive showing that metrology accuracy/sensitivity must be finely tuned. The introduction of pitch splitting (Litho-Etch-Litho-Etch) at 14FDSOInm node requires the development of specific metrologies to adopt advanced process control (for CD, overlay and focus corrections). The pitch splitting process leads to final line CD uniformities that are a combination of the CD uniformities of the two exposures, while the space CD uniformities are depending on both CD and OVL variability. In this paper, investigations of CD and OVL process control of 64nm minimum pitch at Metal1 level of 14FDSOI technology, within the double patterning process flow (Litho, hard mask etch, line etch) are presented. Various measurements with SEMCD tools (Hitachi), and overlay tools (KT for Image Based Overlay - IBO, and ASML for Diffraction Based Overlay - DBO) are compared. Metrology targets are embedded within a block instanced several times within the field to perform intra-field process variations characterizations. Specific SEMCD targets were designed for independent measurement of both line CD (A and B) and space CD (A to B and B to A) for each exposure within a single measurement during the DP flow. Based on those measurements correlation between overlay determined with SEMCD and with standard overlay tools can be evaluated. Such correlation at different steps through the DP flow is investigated regarding the metrology type. Process correction models are evaluated with respect to the measurement type and the intra-field sampling.

Faster diffraction-based overlay measurements with smaller targets using 3D gratings

NASA Astrophysics Data System (ADS)

Li, Jie; Kritsun, Oleg; Liu, Yongdong; Dasari, Prasad; Volkman, Catherine; Hu, Jiangtao

2012-03-01

Diffraction-based overlay (DBO) technologies have been developed to address the overlay metrology challenges for 22nm technology node and beyond. Most DBO technologies require specially designed targets that consist of multiple measurement pads, which consume too much space and increase measurement time. The traditional empirical approach (eDBO) using normal incidence spectroscopic reflectometry (NISR) relies on linear response of the reflectance with respect to overlay displacement within a small range. It offers convenience of quick recipe setup since there is no need to establish a model. However it requires three or four pads per direction (x or y) which adds burden to throughput and target size. Recent advances in modeling capability and computation power enabled mDBO, which allows overlay measurement with reduced number of pads, thus reducing measurement time and DBO target space. In this paper we evaluate the performance of single pad mDBO measurements using two 3D targets that have different grating shapes: squares in boxes and L-shapes in boxes. Good overlay sensitivities are observed for both targets. The correlation to programmed shifts and image-based overlay (IBO) is excellent. Despite the difference in shapes, the mDBO results are comparable for square and L-shape targets. The impact of process variations on overlay measurements is studied using a focus and exposure matrix (FEM) wafer. Although the FEM wafer has larger process variations, the correlation of mDBO results with IBO measurements is as good as the normal process wafer. We demonstrate the feasibility of single pad DBO measurements with faster throughput and smaller target size, which is particularly important in high volume manufacturing environment.

Recovery of Sublethally Injured Bacteria Using Selective Agar Overlays.

ERIC Educational Resources Information Center

McKillip, John L.

2001-01-01

This experiment subjects bacteria in a food sample and an environmental sample to conditions of sublethal stress in order to assess the effectiveness of the agar overlay method to recover sublethally injured cells compared to direct plating onto the appropriate selective medium. (SAH)

Efforts to reduce reflective cracking of bituminous concrete overlays of Portland cement concrete pavements.

DOT National Transportation Integrated Search

1975-01-01

Studies of efforts in Virginia to reduce the incidence of reflection cracking when portland cement concrete pavements or bases are overlayed with asphaltic concrete are reported. The methods of reflection crack reduction discussed are: (1) The use of...

Investigation into shrinkage of high-performance concrete used for Iowa bridge decks and overlays.

DOT National Transportation Integrated Search

2013-09-01

High-performance concrete (HPC) overlays have been used increasingly as an effective and economical method for bridge decks in Iowa and other states. However, due to its high cementitious material content, HPC often displays high shrinkage cracking p...

Posterior open occlusion management by registration of overlay removable partial denture: A clinical report

PubMed Central

Nosouhian, Saeid; Davoudi, Amin; Derhami, Mohammad

2015-01-01

This clinical report describes prosthetic rehabilitation of posterior open bite relationship in a patient with several missing teeth and skeletal Class III malocclusion. Primary diagnostic esthetic evaluations were performed by mounting casts in centric relation and estimating lost vertical dimension of occlusion. Exclusive treatments were designated by applying overlay removable partial denture with external attachment systems for higher retentions. PMID:26929544

Posterior open occlusion management by registration of overlay removable partial denture: A clinical report.

PubMed

Nosouhian, Saeid; Davoudi, Amin; Derhami, Mohammad

2015-01-01

This clinical report describes prosthetic rehabilitation of posterior open bite relationship in a patient with several missing teeth and skeletal Class III malocclusion. Primary diagnostic esthetic evaluations were performed by mounting casts in centric relation and estimating lost vertical dimension of occlusion. Exclusive treatments were designated by applying overlay removable partial denture with external attachment systems for higher retentions.

Comparative stress distribution of implant-retained mandibular ball-supported and bar-supported overlay dentures: a finite element analysis.

PubMed

Vafaei, Fariborz; Khoshhal, Masoumeh; Bayat-Movahed, Saeed; Ahangary, Ahmad Hassan; Firooz, Farnaz; Izady, Alireza; Rakhshan, Vahid

2011-08-01

Implant-retained mandibular ball-supported and bar-supported overlay dentures are the two most common treatment options for the edentulous mandible. The superior option in terms of strain distribution should be determined. The three-dimensional model of mandible (based on computerized tomography scan) and its overlying implant-retained bar-supported and ball-supported overlay dentures were simulated using SolidWorks, NURBS, and ANSYS Workbench. Loads A (60 N) and B (60 N) were exerted, respectively, in protrusive and laterotrusive motions, on second molar mesial, first molar mesial, and first premolar. The strain distribution patterns were assessed on (1) implant tissue, (2) first implant-bone, and (3) second implant-bone interfaces. Protrusive: Strain was mostly detected in the apical of the fixtures and least in the cervical when bar design was used. On the nonworking side, however, strain was higher in the cervical and lower in the apical compared with the working side implant. Laterotrusive: The strain values were closely similar in the two designs. It seems that both designs are acceptable in terms of stress distribution, although a superior pattern is associated with the application of bar design in protrusive motion.

Application of overlay modeling and control with Zernike polynomials in an HVM environment

NASA Astrophysics Data System (ADS)

Ju, JaeWuk; Kim, MinGyu; Lee, JuHan; Nabeth, Jeremy; Jeon, Sanghuck; Heo, Hoyoung; Robinson, John C.; Pierson, Bill

2016-03-01

Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for both intra-field and inter-field models and the model coefficients are sent to an advanced process control (APC) system operating in an XY Cartesian basis. Dampened overlay corrections, typically via exponentially or linearly weighted moving average in time, are then retrieved from the APC system to apply on the scanner in XY Cartesian form for subsequent lot exposure. The goal of the above method is to process lots with corrections that target the least possible overlay misregistration in steady state as well as in change point situations. In this study, we model overlay errors on product using Zernike polynomials with same fitting capability as the process of reference (POR) to represent the wafer-level terms, and use the standard Cartesian polynomials to represent the field-level terms. APC calculations for wafer-level correction are performed in Zernike basis while field-level calculations use standard XY Cartesian basis. Finally, weighted wafer-level correction terms are converted to XY Cartesian space in order to be applied on the scanner, along with field-level corrections, for future wafer exposures. Since Zernike polynomials have the property of being orthogonal in the unit disk we are able to reduce the amount of collinearity between terms and improve overlay stability. Our real time Zernike modeling and feedback evaluation was performed on a 20-lot dataset in a high volume manufacturing (HVM) environment. The measured on-product results were compared to POR and showed a 7% reduction in overlay variation including a 22% terms variation. This led to an on-product raw overlay Mean + 3Sigma X&Y improvement of 5% and resulted in 0.1% yield improvement.

Reliability and reproducibility of several methods of arthroscopic assessment of femoral tunnel position during anterior cruciate ligament reconstruction.

PubMed

Ilahi, Omer A; Mansfield, David J; Urrea, Luis H; Qadeer, Ali A

2014-10-01

To assess interobserver and intraobserver agreement of estimating anterior cruciate ligament (ACL) femoral tunnel positioning arthroscopically using circular and linear (noncircular) estimation methods and to determine whether overlay template visual aids improve agreement. Standardized intraoperative pictures of femoral tunnel pilot holes (taken with a 30° arthroscope through an anterolateral portal at 90° of knee flexion with horizontal being parallel to the tibial surface) in 27 patients undergoing single-bundle ACL reconstruction were presented to 3 fellowship-trained arthroscopists on 2 separate occasions. On both viewings, each surgeon estimated the femoral tunnel pilot hole location to the nearest half-hour mark using a whole clock face and half clock face, to the nearest 15° using a whole compass and half compass, in the top or bottom half of a linear quadrant, and in the top or bottom half of a linear trisector. Evaluations were performed first without and then with an overlay template of each estimation method. The average difference among reviewers was quite similar for all 4 circular methods with the use of visual aids. Without overlay template visual aids, pair-wise κ statistic values for interobserver agreement ranged from -0.14 to 0.56 for the whole clock face and from 0.16 to 0.42 for the half clock face. With overlay visual guides, interobserver agreement ranged from 0.29 to 0.63 for the whole clock face and from 0.17 to 0.66 for the half clock face. The quadrant method's interobserver agreement ranged from 0.22 to 0.60, and that of the trisection method ranged from 0.17 to 0.57. Neither linear estimation method's reliability uniformly improved with the use of overlay templates. Intraobserver agreement without overlay templates ranged from 0.17 to 0.49 for the whole clock face, 0.11 to 0.47 for the half clock face, 0.01 to 0.66 for the quadrant method, and 0.20 to 0.57 for the trisection method. Use of overlay templates did not uniformly improve intraobserver agreement for any estimation method. There does not appear to be any advantage of using a half clock face or compass for estimating femoral tunnel position compared with a whole clock-face analogy. Visual reference aids appear to improve interobserver agreement (reliability) of circular analogies. The linear quadrant appears to be the most reliable method (fair to moderate agreement) for estimating femoral tunnel position without a visual aid for reference, but even better reliability, ranging from fair to good agreement, may be obtained by using the whole clock-face analogy with a visual aid. Increasing femoral tunnel position reliability may improve outcomes of ACL reconstruction surgery. Copyright © 2014 Arthroscopy Association of North America. Published by Elsevier Inc. All rights reserved.

A nanometric Rh overlayer on a metal foil surface as a highly efficient three-way catalyst.

PubMed

Misumi, Satoshi; Yoshida, Hiroshi; Hinokuma, Satoshi; Sato, Tetsuya; Machida, Masato

2016-07-08

Pulsed arc-plasma (AP) deposition of an Rh overlayer on an Fe-Cr-Al stainless steel foil produced a composite material that exhibited high activity for automotive three-way catalysis (TWC). The AP pulses deposited metallic Rh nanoparticles 1-3 nm in size, whose density on the surface increased with the number of pulses. This led to coalescence and grain growth on the foil surface and the eventual formation of a uniform two-dimensional Rh overlayer. Full coverage of the 51 μm-thick flat foil by a 3.2 nm-thick Rh overlayer was achieved after 1,000 pulses. A simulated TWC reaction using a miniature honeycomb fabricated using flat and corrugated foils with the Rh overlayers exhibited successful light-off at a practical gaseous hourly space velocity of 1.2 × 10(5) h(-1). The turnover frequency for the NO-CO reaction over the metallic honeycomb catalyst was ca. 80-fold greater than that achieved with a reference Rh/ZrO2-coated cordierite honeycomb prepared using a conventional wet impregnation and slurry coating procedure. Despite the nonporosity and low surface area of the foil-supported Rh overlayer compared with conventional powder catalysts (Rh/ZrO2), it is a promising alternative design for more efficient automotive catalysts that use less Rh loading.

Gas Selectivity Control in Co3O4 Sensor via Concurrent Tuning of Gas Reforming and Gas Filtering using Nanoscale Hetero-Overlayer of Catalytic Oxides.

PubMed

Jeong, Hyun-Mook; Jeong, Seong-Yong; Kim, Jae-Hyeok; Kim, Bo-Young; Kim, Jun-Sik; Abdel-Hady, Faissal; Wazzan, Abdulaziz A; Al-Turaif, Hamad Ali; Jang, Ho Won; Lee, Jong-Heun

2017-11-29

Co 3 O 4 sensors with a nanoscale TiO 2 or SnO 2 catalytic overlayer were prepared by screen-printing of Co 3 O 4 yolk-shell spheres and subsequent e-beam evaporation of TiO 2 and SnO 2 . The Co 3 O 4 sensors with 5 nm thick TiO 2 and SnO 2 overlayers showed high responses (resistance ratios) to 5 ppm xylene (14.5 and 28.8) and toluene (11.7 and 16.2) at 250 °C with negligible responses to interference gases such as ethanol, HCHO, CO, and benzene. In contrast, the pure Co 3 O 4 sensor did not show remarkable selectivity toward any specific gas. The response and selectivity to methylbenzenes and ethanol could be systematically controlled by selecting the catalytic overlayer material, varying the overlayer thickness, and tuning the sensing temperature. The significant enhancement of the selectivity for xylene and toluene was attributed to the reforming of less reactive methylbenzenes into more reactive and smaller species and oxidative filtering of other interference gases, including ubiquitous ethanol. The concurrent control of the gas reforming and oxidative filtering processes using a nanoscale overlayer of catalytic oxides provides a new, general, and powerful tool for designing highly selective and sensitive oxide semiconductor gas sensors.

Vertical electrical impedance evaluation of asphalt overlays on concrete bridge decks

NASA Astrophysics Data System (ADS)

Baxter, Jared S.; Guthrie, W. Spencer; Waters, Tenli; Barton, Jeffrey D.; Mazzeo, Brian A.

2018-04-01

Vertical electrical impedance scanning of concrete bridge decks is a non-destructive method for quantifying the degree of protection provided to steel reinforcement against the ingress of corrosive agents. Four concrete bridge decks with asphalt overlays in northern Utah were evaluated using scanning vertical electrical impedance measurements in this study. At the time of testing, the bridges ranged in age from 21 to 34 years, and asphalt overlays had been in place for 7 to 22 years, depending on the bridge. Electrical impedance measurements were collected using a previously constructed apparatus that consisted of six probes spanning a transverse distance of 12 ft. The impedance measurements were compared to surface cracking observations and cores obtained from the same four bridge decks. The results presented in this paper demonstrate the utility of scanning vertical electrical impedance measurements for detecting cracks in asphalt overlays and quantifying their severity. In addition, the results demonstrate the sensitivity of impedance measurements to the presence of an intact membrane beneath the asphalt overlay.

Image-based overlay and alignment metrology through optically opaque media with sub-surface probe microscopy

NASA Astrophysics Data System (ADS)

van Es, Maarten H.; Mohtashami, Abbas; Piras, Daniele; Sadeghian, Hamed

2018-03-01

Nondestructive subsurface nanoimaging through optically opaque media is considered to be extremely challenging and is essential for several semiconductor metrology applications including overlay and alignment and buried void and defect characterization. The current key challenge in overlay and alignment is the measurement of targets that are covered by optically opaque layers. Moreover, with the device dimensions moving to the smaller nodes and the issue of the so-called loading effect causing offsets between between targets and product features, it is increasingly desirable to perform alignment and overlay on product features or so-called on-cell overlay, which requires higher lateral resolution than optical methods can provide. Our recently developed technique known as SubSurface Ultrasonic Resonance Force Microscopy (SSURFM) has shown the capability for high-resolution imaging of structures below a surface based on (visco-)elasticity of the constituent materials and as such is a promising technique to perform overlay and alignment with high resolution in upcoming production nodes. In this paper, we describe the developed SSURFM technique and the experimental results on imaging buried features through various layers and the ability to detect objects with resolution below 10 nm. In summary, the experimental results show that the SSURFM is a potential solution for on-cell overlay and alignment as well as detecting buried defects or voids and generally metrology through optically opaque layers.

Design and implementation of flexible TWDM-PON with PtP WDM overlay based on WSS for next-generation optical access networks

NASA Astrophysics Data System (ADS)

Wu, Bin; Yin, Hongxi; Qin, Jie; Liu, Chang; Liu, Anliang; Shao, Qi; Xu, Xiaoguang

2016-09-01

Aiming at the increasing demand of the diversification services and flexible bandwidth allocation of the future access networks, a flexible passive optical network (PON) scheme combining time and wavelength division multiplexing (TWDM) with point-to-point wavelength division multiplexing (PtP WDM) overlay is proposed for the next-generation optical access networks in this paper. A novel software-defined optical distribution network (ODN) structure is designed based on wavelength selective switches (WSS), which can implement wavelength and bandwidth dynamical allocations and suits for the bursty traffic. The experimental results reveal that the TWDM-PON can provide 40 Gb/s downstream and 10 Gb/s upstream data transmission, while the PtP WDM-PON can support 10 GHz point-to-point dedicated bandwidth as the overlay complement system. The wavelengths of the TWDM-PON and PtP WDM-PON are allocated dynamically based on WSS, which verifies the feasibility of the proposed structure.

In-die photomask registration and overlay metrology with PROVE using 2D correlation methods

NASA Astrophysics Data System (ADS)

Seidel, D.; Arnz, M.; Beyer, D.

2011-11-01

According to the ITRS roadmap, semiconductor industry drives the 193nm lithography to its limits, using techniques like double exposure, double patterning, mask-source optimization and inverse lithography. For photomask metrology this translates to full in-die measurement capability for registration and critical dimension together with challenging specifications for repeatability and accuracy. Especially, overlay becomes more and more critical and must be ensured on every die. For this, Carl Zeiss SMS has developed the next generation photomask registration and overlay metrology tool PROVE® which serves the 32nm node and below and which is already well established in the market. PROVE® features highly stable hardware components for the stage and environmental control. To ensure in-die measurement capability, sophisticated image analysis methods based on 2D correlations have been developed. In this paper we demonstrate the in-die capability of PROVE® and present corresponding measurement results for shortterm and long-term measurements as well as the attainable accuracy for feature sizes down to 85nm using different illumination modes and mask types. Standard measurement methods based on threshold criteria are compared with the new 2D correlation methods to demonstrate the performance gain of the latter. In addition, mask-to-mask overlay results of typical box-in-frame structures down to 200nm feature size are presented. It is shown, that from overlay measurements a reproducibility budget can be derived that takes into account stage, image analysis and global effects like mask loading and environmental control. The parts of the budget are quantified from measurement results to identify critical error contributions and to focus on the corresponding improvement strategies.

Codes That Support Smart Growth Development

EPA Pesticide Factsheets

Provides examples of local zoning codes that support smart growth development, categorized by: unified development code, form-based code, transit-oriented development, design guidelines, street design standards, and zoning overlay.

Alignment method for parabolic trough solar concentrators

DOEpatents

Diver, Richard B [Albuquerque, NM

2010-02-23

A Theoretical Overlay Photographic (TOP) alignment method uses the overlay of a theoretical projected image of a perfectly aligned concentrator on a photographic image of the concentrator to align the mirror facets of a parabolic trough solar concentrator. The alignment method is practical and straightforward, and inherently aligns the mirror facets to the receiver. When integrated with clinometer measurements for which gravity and mechanical drag effects have been accounted for and which are made in a manner and location consistent with the alignment method, all of the mirrors on a common drive can be aligned and optimized for any concentrator orientation.

Texas flexible pavements overlays : review and analysis of existing databases.

DOT National Transportation Integrated Search

2011-12-01

Proper calibration of pavement design and rehabilitation performance models to : conditions in Texas is essential for cost-effective flexible pavement design. The degree of : excellence with which TxDOTs pavement design models is calibrated will d...

The effect of augmented reality training on percutaneous needle placement in spinal facet joint injections.

PubMed

Yeo, Caitlin T; Ungi, Tamas; U-Thainual, Paweena; Lasso, Andras; McGraw, Robert C; Fichtinger, Gabor

2011-07-01

The purpose of this study was to determine if augmented reality image overlay and laser guidance systems can assist medical trainees in learning the correct placement of a needle for percutaneous facet joint injection. The Perk Station training suite was used to conduct and record the needle insertion procedures. A total of 40 volunteers were randomized into two groups of 20. 1) The Overlay group received a training session that consisted of four insertions with image and laser guidance, followed by two insertions with laser overlay only. 2) The Control group received a training session of six classical freehand insertions. Both groups then conducted two freehand insertions. The movement of the needle was tracked during the series of insertions. The final insertion procedure was assessed to determine if there was a benefit to the overlay method compared to the freehand insertions. The Overlay group had a better success rate (83.3% versus 68.4%, p=0.002), and potential for less tissue damage as measured by the amount of needle movement inside the phantom (3077.6 mm(2) versus 5607.9 mm(2) , p =0.01). These results suggest that an augmented reality overlay guidance system can assist medical trainees in acquiring technical competence in a percutaneous needle insertion procedure. © 2011 IEEE

VMCast: A VM-Assisted Stability Enhancing Solution for Tree-Based Overlay Multicast

PubMed Central

Gu, Weidong; Zhang, Xinchang; Gong, Bin; Zhang, Wei; Wang, Lu

2015-01-01

Tree-based overlay multicast is an effective group communication method for media streaming applications. However, a group member’s departure causes all of its descendants to be disconnected from the multicast tree for some time, which results in poor performance. The above problem is difficult to be addressed because overlay multicast tree is intrinsically instable. In this paper, we proposed a novel stability enhancing solution, VMCast, for tree-based overlay multicast. This solution uses two types of on-demand cloud virtual machines (VMs), i.e., multicast VMs (MVMs) and compensation VMs (CVMs). MVMs are used to disseminate the multicast data, whereas CVMs are used to offer streaming compensation. The used VMs in the same cloud datacenter constitute a VM cluster. Each VM cluster is responsible for a service domain (VMSD), and each group member belongs to a specific VMSD. The data source delivers the multicast data to MVMs through a reliable path, and MVMs further disseminate the data to group members along domain overlay multicast trees. The above approach structurally improves the stability of the overlay multicast tree. We further utilized CVM-based streaming compensation to enhance the stability of the data distribution in the VMSDs. VMCast can be used as an extension to existing tree-based overlay multicast solutions, to provide better services for media streaming applications. We applied VMCast to two application instances (i.e., HMTP and HCcast). The results show that it can obviously enhance the stability of the data distribution. PMID:26562152

VMCast: A VM-Assisted Stability Enhancing Solution for Tree-Based Overlay Multicast.

PubMed

Gu, Weidong; Zhang, Xinchang; Gong, Bin; Zhang, Wei; Wang, Lu

2015-01-01

Tree-based overlay multicast is an effective group communication method for media streaming applications. However, a group member's departure causes all of its descendants to be disconnected from the multicast tree for some time, which results in poor performance. The above problem is difficult to be addressed because overlay multicast tree is intrinsically instable. In this paper, we proposed a novel stability enhancing solution, VMCast, for tree-based overlay multicast. This solution uses two types of on-demand cloud virtual machines (VMs), i.e., multicast VMs (MVMs) and compensation VMs (CVMs). MVMs are used to disseminate the multicast data, whereas CVMs are used to offer streaming compensation. The used VMs in the same cloud datacenter constitute a VM cluster. Each VM cluster is responsible for a service domain (VMSD), and each group member belongs to a specific VMSD. The data source delivers the multicast data to MVMs through a reliable path, and MVMs further disseminate the data to group members along domain overlay multicast trees. The above approach structurally improves the stability of the overlay multicast tree. We further utilized CVM-based streaming compensation to enhance the stability of the data distribution in the VMSDs. VMCast can be used as an extension to existing tree-based overlay multicast solutions, to provide better services for media streaming applications. We applied VMCast to two application instances (i.e., HMTP and HCcast). The results show that it can obviously enhance the stability of the data distribution.

Precise X-ray and video overlay for augmented reality fluoroscopy.

PubMed

Chen, Xin; Wang, Lejing; Fallavollita, Pascal; Navab, Nassir

2013-01-01

The camera-augmented mobile C-arm (CamC) augments any mobile C-arm by a video camera and mirror construction and provides a co-registration of X-ray with video images. The accurate overlay between these images is crucial to high-quality surgical outcomes. In this work, we propose a practical solution that improves the overlay accuracy for any C-arm orientation by: (i) improving the existing CamC calibration, (ii) removing distortion effects, and (iii) accounting for the mechanical sagging of the C-arm gantry due to gravity. A planar phantom is constructed and placed at different distances to the image intensifier in order to obtain the optimal homography that co-registers X-ray and video with a minimum error. To alleviate distortion, both X-ray calibration based on equidistant grid model and Zhang's camera calibration method are implemented for distortion correction. Lastly, the virtual detector plane (VDP) method is adapted and integrated to reduce errors due to the mechanical sagging of the C-arm gantry. The overlay errors are 0.38±0.06 mm when not correcting for distortion, 0.27±0.06 mm when applying Zhang's camera calibration, and 0.27±0.05 mm when applying X-ray calibration. Lastly, when taking into account all angular and orbital rotations of the C-arm, as well as correcting for distortion, the overlay errors are 0.53±0.24 mm using VDP and 1.67±1.25 mm excluding VDP. The augmented reality fluoroscope achieves an accurate video and X-ray overlay when applying the optimal homography calculated from distortion correction using X-ray calibration together with the VDP.

Using the overlay assay to qualitatively measure bacterial production of and sensitivity to pneumococcal bacteriocins.

PubMed

Maricic, Natalie; Dawid, Suzanne

2014-09-30

Streptococcus pneumoniae colonizes the highly diverse polymicrobial community of the nasopharynx where it must compete with resident organisms. We have shown that bacterially produced antimicrobial peptides (bacteriocins) dictate the outcome of these competitive interactions. All fully-sequenced pneumococcal strains harbor a bacteriocin-like peptide (blp) locus. The blp locus encodes for a range of diverse bacteriocins and all of the highly conserved components needed for their regulation, processing, and secretion. The diversity of the bacteriocins found in the bacteriocin immunity region (BIR) of the locus is a major contributor of pneumococcal competition. Along with the bacteriocins, immunity genes are found in the BIR and are needed to protect the producer cell from the effects of its own bacteriocin. The overlay assay is a quick method for examining a large number of strains for competitive interactions mediated by bacteriocins. The overlay assay also allows for the characterization of bacteriocin-specific immunity, and detection of secreted quorum sensing peptides. The assay is performed by pre-inoculating an agar plate with a strain to be tested for bacteriocin production followed by application of a soft agar overlay containing a strain to be tested for bacteriocin sensitivity. A zone of clearance surrounding the stab indicates that the overlay strain is sensitive to the bacteriocins produced by the pre-inoculated strain. If no zone of clearance is observed, either the overlay strain is immune to the bacteriocins being produced or the pre-inoculated strain does not produce bacteriocins. To determine if the blp locus is functional in a given strain, the overlay assay can be adapted to evaluate for peptide pheromone secretion by the pre-inoculated strain. In this case, a series of four lacZ-reporter strains with different pheromone specificity are used in the overlay.

Assessing the Crossdisciplinarity of Technology-Enhanced Learning with Science Overlay Maps and Diversity Measures

ERIC Educational Resources Information Center

Kalz, Marco; Specht, Marcus

2014-01-01

This paper deals with the assessment of the crossdisciplinarity of technology-enhanced learning (TEL). Based on a general discussion of the concept interdisciplinarity and a summary of the discussion in the field, two empirical methods from scientometrics are introduced and applied. Science overlay maps and the Rao-Stirling diversity index are…

Improved antifouling properties and selective biofunctionalization of stainless steel by employing heterobifunctional silane-polyethylene glycol overlayers and avidin-biotin technology

PubMed Central

Hynninen, Ville; Vuori, Leena; Hannula, Markku; Tapio, Kosti; Lahtonen, Kimmo; Isoniemi, Tommi; Lehtonen, Elina; Hirsimäki, Mika; Toppari, J. Jussi; Valden, Mika; Hytönen, Vesa P.

2016-01-01

A straightforward solution-based method to modify the biofunctionality of stainless steel (SS) using heterobifunctional silane-polyethylene glycol (silane-PEG) overlayers is reported. Reduced nonspecific biofouling of both proteins and bacteria onto SS and further selective biofunctionalization of the modified surface were achieved. According to photoelectron spectroscopy analyses, the silane-PEGs formed less than 10 Å thick overlayers with close to 90% surface coverage and reproducible chemical compositions. Consequently, the surfaces also became more hydrophilic, and the observed non-specific biofouling of proteins was reduced by approximately 70%. In addition, the attachment of E. coli was reduced by more than 65%. Moreover, the potential of the overlayer to be further modified was demonstrated by successfully coupling biotinylated alkaline phosphatase (bAP) to a silane-PEG-biotin overlayer via avidin-biotin bridges. The activity of the immobilized enzyme was shown to be well preserved without compromising the achieved antifouling properties. Overall, the simple solution-based approach enables the tailoring of SS to enhance its activity for biomedical and biotechnological applications. PMID:27381834

Improved antifouling properties and selective biofunctionalization of stainless steel by employing heterobifunctional silane-polyethylene glycol overlayers and avidin-biotin technology

NASA Astrophysics Data System (ADS)

Hynninen, Ville; Vuori, Leena; Hannula, Markku; Tapio, Kosti; Lahtonen, Kimmo; Isoniemi, Tommi; Lehtonen, Elina; Hirsimäki, Mika; Toppari, J. Jussi; Valden, Mika; Hytönen, Vesa P.

2016-07-01

A straightforward solution-based method to modify the biofunctionality of stainless steel (SS) using heterobifunctional silane-polyethylene glycol (silane-PEG) overlayers is reported. Reduced nonspecific biofouling of both proteins and bacteria onto SS and further selective biofunctionalization of the modified surface were achieved. According to photoelectron spectroscopy analyses, the silane-PEGs formed less than 10 Å thick overlayers with close to 90% surface coverage and reproducible chemical compositions. Consequently, the surfaces also became more hydrophilic, and the observed non-specific biofouling of proteins was reduced by approximately 70%. In addition, the attachment of E. coli was reduced by more than 65%. Moreover, the potential of the overlayer to be further modified was demonstrated by successfully coupling biotinylated alkaline phosphatase (bAP) to a silane-PEG-biotin overlayer via avidin-biotin bridges. The activity of the immobilized enzyme was shown to be well preserved without compromising the achieved antifouling properties. Overall, the simple solution-based approach enables the tailoring of SS to enhance its activity for biomedical and biotechnological applications.

75 FR 13340 - Notice of Passenger Facility Charge (PFC) Approvals and Disapprovals

Federal Register 2010, 2011, 2012, 2013, 2014

2010-03-19

...--design and construction. Terminal facility improvements--design and construction. Runway pavement overlay... Collection at CHS and Use at CHS: Upgrade police radio communications. Design flight/baggage information... expansion--design. Standardize airfield signage. Restripe airfield taxiway and ramp edge. Improve airport...

Overlay degradation induced by film stress

NASA Astrophysics Data System (ADS)

Huang, Chi-hao; Liu, Yu-Lin; Luo, Shing-Ann; Yang, Mars; Yang, Elvis; Hung, Yung-Tai; Luoh, Tuung; Yang, T. H.; Chen, K. C.

2017-03-01

The semiconductor industry has continually sought the approaches to produce memory devices with increased memory cells per memory die. One way to meet the increasing storage capacity demand and reduce bit cost of NAND flash memories is 3D stacked flash cell array. In constructing 3D NAND flash memories, increasing the number of stacked layers to build more memory cell number per unit area necessitates many high-aspect-ratio etching processes accordingly the incorporation of thick and unique etching hard-mask scheme has been indispensable. However, the ever increasingly thick requirement on etching hard-mask has made the hard-mask film stress control extremely important for maintaining good process qualities. The residual film stress alters the wafer shape consequently several process impacts have been readily observed across wafer, such as wafer chucking error on scanner, film peeling, materials coating and baking defects, critical dimension (CD) non-uniformity and overlay degradation. This work investigates the overlay and residual order performance indicator (ROPI) degradation coupling with increasingly thick advanced patterning film (APF) etching hard-mask. Various APF films deposited by plasma enhanced chemical vapor deposition (PECVD) method under different deposition temperatures, chemicals combinations, radio frequency powers and chamber pressures were carried out. And -342MPa to +80MPa film stress with different film thicknesses were generated for the overlay performance study. The results revealed the overlay degradation doesn't directly correlate with convex or concave wafer shapes but the magnitude of residual APF film stress, while increasing the APF thickness will worsen the overlay performance and ROPI strongly. High-stress APF film was also observed to enhance the scanner chucking difference and lead to more serious wafer to wafer overlay variation. To reduce the overlay degradation from ever increasingly thick APF etching hard-mask, optimizing the film stress of APF is the most effective way and high order overlay compensation is also helpful.

Feed-forward alignment correction for advanced overlay process control using a standalone alignment station "Litho Booster"

NASA Astrophysics Data System (ADS)

Yahiro, Takehisa; Sawamura, Junpei; Dosho, Tomonori; Shiba, Yuji; Ando, Satoshi; Ishikawa, Jun; Morita, Masahiro; Shibazaki, Yuichi

2018-03-01

One of the main components of an On-Product Overlay (OPO) error budget is the process induced wafer error. This necessitates wafer-to-wafer correction in order to optimize overlay accuracy. This paper introduces the Litho Booster (LB), standalone alignment station as a solution to improving OPO. LB can execute high speed alignment measurements without throughput (THP) loss. LB can be installed in any lithography process control loop as a metrology tool, and is then able to provide feed-forward (FF) corrections to the scanners. In this paper, the detailed LB design is described and basic LB performance and OPO improvement is demonstrated. Litho Booster's extendibility and applicability as a solution for next generation manufacturing accuracy and productivity challenges are also outlined

Flutter Analysis of the Shuttle Tile Overlay Repair Concept

NASA Technical Reports Server (NTRS)

Bey, Kim S.; Scott, Robert C.; Bartels, Robert E.; Waters, William A.; Chen, Roger

2007-01-01

The Space Shuttle tile overlay repair concept, developed at the NASA Johnson Space Center, is designed for on-orbit installation over an area of damaged tile to permit safe re-entry. The thin flexible plate is placed over the damaged area and secured to tile at discreet points around its perimeter. A series of flutter analyses were performed to determine if the onset of flutter met the required safety margins. Normal vibration modes of the panel, obtained from a simplified structural analysis of the installed concept, were combined with a series of aerodynamic analyses of increasing levels of fidelity in terms of modeling the flow physics to determine the onset of flutter. Results from these analyses indicate that it is unlikely that the overlay installed at body point 1800 will flutter during re-entry.

The USAF Stability and Control Digital DATCOM. Volume II. Implementation of Datcom Methods

DTIC Science & Technology

1979-04-01

10N1S PAGE (Wheon 004 Enitletd4 811 UNCLASSIFIED SLkCUMITY CLASSIFICATION Or TAIIS PLQOS(W 1 D#* *,.E) , ---- program capabilities, input and output...J F. )W ..)- vi, w V)4 iI- C,)- co C’,J m m ~ 24 0 cr.’ >44 -i u S-P 0 CC uju w-12. 4.)L LW 3 0- -r DDc o0- C1 oa =ca C CC LA. CDCd LLjJ o 0...is located,, XX is the primary overlay number in decimal , and YY is the secondary overlay number in decimal . Hence, each overlay is written to a disk

Overlay accuracy fundamentals

NASA Astrophysics Data System (ADS)

Kandel, Daniel; Levinski, Vladimir; Sapiens, Noam; Cohen, Guy; Amit, Eran; Klein, Dana; Vakshtein, Irina

2012-03-01

Currently, the performance of overlay metrology is evaluated mainly based on random error contributions such as precision and TIS variability. With the expected shrinkage of the overlay metrology budget to < 0.5nm, it becomes crucial to include also systematic error contributions which affect the accuracy of the metrology. Here we discuss fundamental aspects of overlay accuracy and a methodology to improve accuracy significantly. We identify overlay mark imperfections and their interaction with the metrology technology, as the main source of overlay inaccuracy. The most important type of mark imperfection is mark asymmetry. Overlay mark asymmetry leads to a geometrical ambiguity in the definition of overlay, which can be ~1nm or less. It is shown theoretically and in simulations that the metrology may enhance the effect of overlay mark asymmetry significantly and lead to metrology inaccuracy ~10nm, much larger than the geometrical ambiguity. The analysis is carried out for two different overlay metrology technologies: Imaging overlay and DBO (1st order diffraction based overlay). It is demonstrated that the sensitivity of DBO to overlay mark asymmetry is larger than the sensitivity of imaging overlay. Finally, we show that a recently developed measurement quality metric serves as a valuable tool for improving overlay metrology accuracy. Simulation results demonstrate that the accuracy of imaging overlay can be improved significantly by recipe setup optimized using the quality metric. We conclude that imaging overlay metrology, complemented by appropriate use of measurement quality metric, results in optimal overlay accuracy.

Processing method for forming dislocation-free SOI and other materials for semiconductor use

DOEpatents

Holland, Orin Wayne; Thomas, Darrell Keith; Zhou, Dashun

1997-01-01

A method for preparing a silicon-on-insulator material having a relatively defect-free Si overlayer involves the implanting of oxygen ions within a silicon body and the interruption of the oxygen-implanting step to implant Si ions within the silicon body. The implanting of the oxygen ions develops an oxide layer beneath the surface of the silicon body, and the Si ions introduced by the Si ion-implanting step relieves strain which is developed in the Si overlayer during the implanting step without the need for any intervening annealing step. By relieving the strain in this manner, the likelihood of the formation of strain-induced defects in the Si overlayer is reduced. In addition, the method can be carried out at lower processing temperatures than have heretofore been used with SIMOX processes of the prior art. The principles of the invention can also be used to relieve negative strain which has been induced in a silicon body of relatively ordered lattice structure.

Sandia Corporation (Albuquerque, NM)

DOEpatents

Diver, Richard B.

2010-02-23

A Theoretical Overlay Photographic (TOP) alignment method uses the overlay of a theoretical projected image of a perfectly aligned concentrator on a photographic image of the concentrator to align the mirror facets of a parabolic trough solar concentrator. The alignment method is practical and straightforward, and inherently aligns the mirror facets to the receiver. When integrated with clinometer measurements for which gravity and mechanical drag effects have been accounted for and which are made in a manner and location consistent with the alignment method, all of the mirrors on a common drive can be aligned and optimized for any concentrator orientation.

First-principles study of nitric oxide oxidation on Pt(111) versus Pt overlayer on 3d transition metals

DOE Office of Scientific and Technical Information (OSTI.GOV)

Arevalo, Ryan Lacdao; Escaño, Mary Clare Sison; Kasai, Hideaki, E-mail: kasai@dyn.ap.eng.osaka-u.ac.jp

2015-03-15

Catalytic oxidation of NO to NO{sub 2} is a significant research interest for improving the quality of air through exhaust gas purification systems. In this paper, the authors studied this reaction on pure Pt and Pt overlayer on 3d transition metals using kinetic Monte Carlo simulations coupled with density functional theory based first principles calculations. The authors found that on the Pt(111) surface, NO oxidation proceeds via the Eley–Rideal mechanism, with O{sub 2} dissociative adsorption as the rate-determining step. The oxidation path via the Langmuir–Hinshelwood mechanism is very slow and does not significantly contribute to the overall reaction. However, inmore » the Pt overlayer systems, the oxidation of NO on the surface is more thermodynamically and kinetically favorable compared to pure Pt. These findings are attributed to the weaker binding of O and NO on the Pt overlayer systems and the binding configuration of NO{sub 2} that promotes easier N-O bond formation. These results present insights for designing affordable and efficient catalysts for NO oxidation.« less

Texas flexible pavements and overlays : year 5 report - complete data documentation.

DOT National Transportation Integrated Search

2017-05-01

Proper calibration and validation of pavement design and performance models to Texas conditions is : essential for cost-effective flexible pavement design, performance predictions, and maintenance/rehab : strategies. The veracity of the calibration o...

Flexible pavement rehabilitation manual. Rev., June 2001

DOT National Transportation Integrated Search

2001-06-01

This manual delineates the basic design strategies of the 1979 "Asphalt Concrete Overlay Design Manual" plus the many changes in procedures, and incorporates the use of new strategies and materials presently being used by Caltrans. Environmental conc...

Evaluation of the Cargill SafeLane surface overlay.

DOT National Transportation Integrated Search

2009-01-01

A recent development in polymer concrete overlays is the Cargill SafeLane surface overlay (SafeLane overlay). The 3/8-in-thick overlay is constructed with epoxy and broadcast aggregates, as are typical multiple-layer epoxy overlays that are used to p...

Status of downstream fish passage at hydroelectric projects in the northeast, USA

USGS Publications Warehouse

Odeh, Mufeed; Orvis, Curtis

1997-01-01

In the northeastern United States several guidance, protection, and conveyance methods have been employed to assist downstream migrating fish. Overlay racks, standard bar racks with close spacing, louvers, curtain walls, guide walls, netting, and other means have been used to guide and protect fish from entrainment. The design process of these facilities comprises consideration of various factors, including flow approach, attraction flow, guidance and protection devices, bypass location, conveyance mechanism, and plunge pool conditions. This paper presents the status of the design criteria for downstream fish passage facilities at hydroelectric sites in the northeast part of the United States. Examples of existing facilities are given.

ArF step-and-scan system with 0.75 NA for the 0.10μm node

NASA Astrophysics Data System (ADS)

Vleeming, Bert; Heskamp, Barbra; Bakker, Hans; Verstappen, Leon; Finders, Jo; Stoeten, Jan; Boerret, Rainer; Roempp, Oliver

2001-09-01

It is widely expected that 193 nm lithography will be the technology of choice for volume production of the 0.10 micrometer device generation. For this purpose the PAS5500/1100TM Step & Scan system, the second generation ArF tool, was developed. It is based on the PAS5500/900TM, the body of which has been adapted to fit the new 0.75 NA StarlithTM projection optics. This high NA enables mass manufacturing of devices following the 0.10 micrometer design rule. The system features a 10 W 2 kHz ArF laser and the AERIALTM II illuminator that can be equipped with a QUASARTM (multipole) option. In order to minimize wafer processing influences on overlay performance ATHENATM off- axis alignment with phase modulator is implemented. The usage of Reticle Blue Alignment will further improve overlay as well as increase the system stability. In this paper the PAS5500/1100TM system layout is discussed and the first imaging and overlay results are presented. Imaging performance is illustrated by SEM pictures of 0.10 micrometer dense lines, 0.15, 0.13 and 0.12 micrometer dense contact holes, 0.10 micrometer DRAM isolation patterns, image plane deviation and system distortion fingerprints. Alignment reproducibility and single machine overlay results demonstrate the overlay capability.

Posterior indirect adhesive 
restorations: updated indications 
and the Morphology Driven 
Preparation Technique.

PubMed

Veneziani, Marco

The aim of this article is to identify the indications for adhesively cemented restorations and to provide a correct step-by-step protocol for clinicians. New cavity preparation principles are based on morphological considerations in terms of geometry (maximum profile line and inclination of cusp lines), and structure (dentin concavity and enamel convexity). In this article, we discuss previous preparation concepts that were not designed purely for adhesive restorations and were therefore not conservative enough or suitable for adhesive procedures. The novel cavity shape consists of continuous inclined plane cavity margins (hollow chamfer or concave bevel) on axial walls, whenever they are coronal to the equatorial tooth line. A 1.2 mm-thick butt-joint preparation is performed in the interproximal box and on the axial walls when the margins are apical to the equatorial line. The occlusal surface is anatomically prepared, free of slots and angles. The author's suggestion is to avoid shoulder finish line preparation around cusps, occlusal slots, and pins, as they are less conservative, incompatible with adhesive procedures, and involve unnecessary dentin exposure. The clinical advantages of this new "anatomic" preparation design are 1) improving adhesion quality (optimizing the cutting of enamel prisms, and increasing the available enamel surface); 2) minimizing dentin exposure; 3) maximizing hard tissue preservation (the cavity being designed for cementation with reinforced composite resins, improvement of flow, and removal of excess material); 4) optimization of esthetic integration due to the inclined plane design, which permits a better blending at the transition area between tooth and restoration. These preparation principles may be effectively used for all adhesively cemented restorations, both according to traditional concepts (inlay, onlay, overlay) and new ones (additional overlay, occlusal-veneer, overlay-veneer, long-wrap overlay, adhesive crown). Thus, a balance between restoration and prosthodontics is created, which is characterized by a more conservative approach.

Guidelines on design and construction of high performance thin HMA overlays.

DOT National Transportation Integrated Search

2016-08-01

Key Components of Mix Design and Material Properties: : High-quality aggregate - SAC A for high : volume roads : - PG 70 or 76 (Polymer Modified binders) : - RAP and RAS (shingles) not allowed : - Minimum binder content ( Over 6%) : - Pay for binder ...

Collection of materials and performance data for Texas flexible pavements and overlays : project summary.

DOT National Transportation Integrated Search

2015-08-31

Proper calibration of mechanistic-empirical : (M-E) design and rehabilitation performance : models to meet Texas conditions is essential : for cost-effective flexible pavement designs. : Such a calibration effort would require a : reliable source of ...

Plastic (wire-combed) grooving of a slip-formed concrete runway overlay at Patrick Henry Airport: An initial evaluation

NASA Technical Reports Server (NTRS)

Marlin, E. C.; Horne, W. B.

1977-01-01

A wire-comb technique is described for transversely grooving the surface of a freshly laid (plastic state) slip-formed concrete overlay installed at Patrick Henry Airport. This method of surface texturing yields better water drainage and pavement skid resistance than that obtained with an older conventional burlap drag concrete surface treatment installed on an adjacent portion of the runway.

Reducing overlay sampling for APC-based correction per exposure by replacing measured data with computational prediction

NASA Astrophysics Data System (ADS)

Noyes, Ben F.; Mokaberi, Babak; Oh, Jong Hun; Kim, Hyun Sik; Sung, Jun Ha; Kea, Marc

2016-03-01

One of the keys to successful mass production of sub-20nm nodes in the semiconductor industry is the development of an overlay correction strategy that can meet specifications, reduce the number of layers that require dedicated chuck overlay, and minimize measurement time. Three important aspects of this strategy are: correction per exposure (CPE), integrated metrology (IM), and the prioritization of automated correction over manual subrecipes. The first and third aspects are accomplished through an APC system that uses measurements from production lots to generate CPE corrections that are dynamically applied to future lots. The drawback of this method is that production overlay sampling must be extremely high in order to provide the system with enough data to generate CPE. That drawback makes IM particularly difficult because of the throughput impact that can be created on expensive bottleneck photolithography process tools. The goal is to realize the cycle time and feedback benefits of IM coupled with the enhanced overlay correction capability of automated CPE without impacting process tool throughput. This paper will discuss the development of a system that sends measured data with reduced sampling via an optimized layout to the exposure tool's computational modelling platform to predict and create "upsampled" overlay data in a customizable output layout that is compatible with the fab user CPE APC system. The result is dynamic CPE without the burden of extensive measurement time, which leads to increased utilization of IM.

How big does a coloured overlay have to be?

PubMed

Waldie, Michelle; Wilkins, Arnold

2004-01-01

Coloured overlays and coloured lenses can both increase reading speed, but when they do their colour is not necessarily the same, suggesting that the beneficial effects of a coloured filter might depend upon the area of the visual field that it colours. We investigated the effects of overlays on reading speed and varied the size of the overlay and the colour of the surround. Children who had been assessed with coloured overlays were required to read a passage of randomly ordered common words. The words were printed in black ink as a block of text positioned centrally on an A4 page of white paper in landscape orientation. The speed of reading was compared under four conditions: (1) without an overlay; (2) with an overlay of the chosen colour covering the entire page; (3) with the overlay cut so that it just covered the text but left the margin white; (4) with the overlay of the chosen colour covering the text but with the margin coloured a complementary colour, using a second overlay. The children who were using an overlay read more quickly with the overlay; those who were no longer using the overlay did not. Although the block of text covered less than half the page, the colour and nature of the margin did not affect reading speed significantly. These findings suggest that in order to be effective at improving reading speed an overlay needs to cover the text, but not necessarily the remainder of the page, which means that smaller overlays may sometimes be sufficient.

Disbond detection with piezoelectric wafer active sensors in RC structures strengthened with FRP composite overlays

NASA Astrophysics Data System (ADS)

Giurgiutiu, Victor; Harries, Kent; Petrou, Michael; Bost, Joel; Quattlebaum, Josh B.

2003-12-01

The capability of embedded piezoelectric wafer active sensors (PWAS) to perform in-situ nondestructive evaluation (NDE) for structural health monitoring (SHM) of reinforced concrete (RC) structures strengthened with fiber reinforced polymer (FRP) composite overlays is explored. First, the disbond detection method were developed on coupon specimens consisting of concrete blocks covered with an FRP composite layer. It was found that the presence of a disbond crack drastically changes the electromechanical (E/M) impedance spectrum measured at the PWAS terminals. The spectral changes depend on the distance between the PWAS and the crack tip. Second, large scale experiments were conducted on a RC beam strengthened with carbon fiber reinforced polymer (CFRP) composite overlay. The beam was subject to an accelerated fatigue load regime in a three-point bending configuration up to a total of 807,415 cycles. During these fatigue tests, the CFRP overlay experienced disbonding beginning at about 500,000 cycles. The PWAS were able to detect the disbonding before it could be reliably seen by visual inspection. Good correlation between the PWAS readings and the position and extent of disbond damage was observed. These preliminary results demonstrate the potential of PWAS technology for SHM of RC structures strengthened with FRP composite overlays.

Multi-wavelength approach towards on-product overlay accuracy and robustness

NASA Astrophysics Data System (ADS)

Bhattacharyya, Kaustuve; Noot, Marc; Chang, Hammer; Liao, Sax; Chang, Ken; Gosali, Benny; Su, Eason; Wang, Cathy; den Boef, Arie; Fouquet, Christophe; Huang, Guo-Tsai; Chen, Kai-Hsiung; Cheng, Kevin; Lin, John

2018-03-01

Success of diffraction-based overlay (DBO) technique1,4,5 in the industry is not just for its good precision and low toolinduced shift, but also for the measurement accuracy2 and robustness that DBO can provide. Significant efforts are put in to capitalize on the potential that DBO has to address measurement accuracy and robustness. Introduction of many measurement wavelength choices (continuous wavelength) in DBO is one of the key new capabilities in this area. Along with the continuous choice of wavelengths, the algorithms (fueled by swing-curve physics) on how to use these wavelengths are of high importance for a robust recipe setup that can avoid the impact from process stack variations (symmetric as well as asymmetric). All these are discussed. Moreover, another aspect of boosting measurement accuracy and robustness is discussed that deploys the capability to combine overlay measurement data from multiple wavelength measurements. The goal is to provide a method to make overlay measurements immune from process stack variations and also to report health KPIs for every measurement. By combining measurements from multiple wavelengths, a final overlay measurement is generated. The results show a significant benefit in accuracy and robustness against process stack variation. These results are supported by both measurement data as well as simulation from many product stacks.

Use of recycled chunk rubber asphalt concrete (CRAC) on low volume roads and use of recycled crumb rubber modifier in asphalt pavements. Final report, June 1993-June 1995

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hossain, M.; Funk, L.P.; Sadeq, M.A.

1995-06-01

The major objective of this project was to formulate a Chunk Rubber Asphalt Concrete (CRAC) mix for use on low volume roads. CRAC is a rubber modified asphalt concrete product produced by the `dry process` where rubber chunks of 1/2 inch size are used as aggregate in a cold mix with a type C fly ash. The second objective of this project was to develop guidelines concerning the use of rubber modified asphalt concrete hot mix to include: (1) Design methods for use of asphalt-rubber mix for new construction and overlay, (2) Mix design method for asphalt-rubber, and (3) Testmore » method for determining the amount of rubber in an asphalt-rubber concrete for quality control purposes.« less

Plaquing procedure for infectious hematopoietic necrosis virus

USGS Publications Warehouse

Burke, J.A.; Mulcahy, D.

1980-01-01

A single overlay plaque assay was designed and evaluated for infectious hematopoietic necrosis virus. Epithelioma papillosum carpio cells were grown in normal atmosphere with tris(hydroxymethyl)aminomethane- or HEPES (N-2-hydroxyethylpiperazine-N'-2-ethanesulfonic acid)-buffered media. Plaques were larger and formed more quickly on 1- to 3-day-old cell monolayers than on older monolayers. Cell culture medium with a 10% addition of fetal calf serum (MEM 10) or without serum (MEM 0) were the most efficient virus diluents. Dilution with phosphate-buffered saline, saline, normal broth, or deionized water reduced plaque numbers. Variations in the pH (7.0 to 8.0) of a MEM 0 diluent did not affect plaque numbers. Increasing the volume of viral inoculum above 0.15 ml (15- by 60-mm plate) decreased plaquing efficiency. Significantly more plaques occurred under gum tragacanth and methylcellulose than under agar or agarose overlays. Varying the pH (6.8 to 7.4) of methylcellulose overlays did not significantly change plaque numbers. More plaques formed under the thicker overlays of both methylcellulose and gum tragacanth. Tris(hydroxymethyl)aminomethane and HEPES performed equally well, buffering either medium or overlay. Plaque numbers were reduced when cells were rinsed after virus adsorption or less than 1 h was allowed for adsorption. Variation in adsorption time between 60 and 180 min did not change plaque numbers. The mean plaque formation time was 7 days at 16 degrees C. The viral dose response was linear when the standardized assay was used.

Low-energy yield spectroscopy determination of band offsets: application to the epitaxial Ge/Si(100) heterostructure

NASA Astrophysics Data System (ADS)

Di Gaspare, L.; Capellini, G.; Chudoba, C.; Sebastiani, M.; Evangelisti, F.

1996-09-01

We apply a new experimental method for determining band lineups at the Ge/Si(100) heterostructure. This method uses a modern version of an old spectroscopy: the photoelectric yield spectroscopy excited with photons in the near UV range. It is shown that both substrate and overlayer valence-band tops can be identified in the yield spectrum, thus allowing a direct and precise determination of the band lineup. We find an offset of 0.36 ± 0.02 eV for heterojunctions whose overlayers were grown according to the Stranski-Krastanov mechanism.

Image-based overlay measurement using subsurface ultrasonic resonance force microscopy

NASA Astrophysics Data System (ADS)

Tamer, M. S.; van der Lans, M. J.; Sadeghian, H.

2018-03-01

Image Based Overlay (IBO) measurement is one of the most common techniques used in Integrated Circuit (IC) manufacturing to extract the overlay error values. The overlay error is measured using dedicated overlay targets which are optimized to increase the accuracy and the resolution, but these features are much larger than the IC feature size. IBO measurements are realized on the dedicated targets instead of product features, because the current overlay metrology solutions, mainly based on optics, cannot provide sufficient resolution on product features. However, considering the fact that the overlay error tolerance is approaching 2 nm, the overlay error measurement on product features becomes a need for the industry. For sub-nanometer resolution metrology, Scanning Probe Microscopy (SPM) is widely used, though at the cost of very low throughput. The semiconductor industry is interested in non-destructive imaging of buried structures under one or more layers for the application of overlay and wafer alignment, specifically through optically opaque media. Recently an SPM technique has been developed for imaging subsurface features which can be potentially considered as a solution for overlay metrology. In this paper we present the use of Subsurface Ultrasonic Resonance Force Microscopy (SSURFM) used for IBO measurement. We used SSURFM for imaging the most commonly used overlay targets on a silicon substrate and photoresist. As a proof of concept we have imaged surface and subsurface structures simultaneously. The surface and subsurface features of the overlay targets are fabricated with programmed overlay errors of +/-40 nm, +/-20 nm, and 0 nm. The top layer thickness changes between 30 nm and 80 nm. Using SSURFM the surface and subsurface features were successfully imaged and the overlay errors were extracted, via a rudimentary image processing algorithm. The measurement results are in agreement with the nominal values of the programmed overlay errors.

Video see-through augmented reality for oral and maxillofacial surgery.

PubMed

Wang, Junchen; Suenaga, Hideyuki; Yang, Liangjing; Kobayashi, Etsuko; Sakuma, Ichiro

2017-06-01

Oral and maxillofacial surgery has not been benefitting from image guidance techniques owing to the limitations in image registration. A real-time markerless image registration method is proposed by integrating a shape matching method into a 2D tracking framework. The image registration is performed by matching the patient's teeth model with intraoperative video to obtain its pose. The resulting pose is used to overlay relevant models from the same CT space on the camera video for augmented reality. The proposed system was evaluated on mandible/maxilla phantoms, a volunteer and clinical data. Experimental results show that the target overlay error is about 1 mm, and the frame rate of registration update yields 3-5 frames per second with a 4 K camera. The significance of this work lies in its simplicity in clinical setting and the seamless integration into the current medical procedure with satisfactory response time and overlay accuracy. Copyright © 2016 John Wiley & Sons, Ltd. Copyright © 2016 John Wiley & Sons, Ltd.

Performance of ASML YieldStar μDBO overlay targets for advanced lithography nodes C028 and C014 overlay process control

NASA Astrophysics Data System (ADS)

Blancquaert, Yoann; Dezauzier, Christophe; Depre, Jerome; Miqyass, Mohamed; Beltman, Jan

2013-04-01

Continued tightening of overlay control budget in semiconductor lithography drives the need for improved metrology capabilities. Aggressive improvements are needed for overlay metrology speed, accuracy and precision. This paper is dealing with the on product metrology results of a scatterometry based platform showing excellent production results on resolution, precision, and tool matching for overlay. We will demonstrate point to point matching between tool generations as well as between target sizes and types. Nowadays, for the advanced process nodes a lot of information is needed (Higher order process correction, Reticle fingerprint, wafer edge effects) to quantify process overlay. For that purpose various overlay sampling schemes are evaluated: ultra- dense, dense and production type. We will show DBO results from multiple target type and shape for on product overlay control for current and future node down to at least 14 nm node. As overlay requirements drive metrology needs, we will evaluate if the new metrology platform meets the overlay requirements.

Life prediction and constitutive models for engine hot section anisotropic materials program

NASA Technical Reports Server (NTRS)

Swanson, G. A.; Linask, I.; Nissley, D. M.; Norris, P. P.; Meyer, T. G.; Walker, K. P.

1986-01-01

This report presents the results of the first year of a program designed to develop life prediction and constitutive models for two coated single crystal alloys used in gas turbine airfoils. The two alloys are PWA 1480 and Alloy 185. The two oxidation resistant coatings are PWA 273, an aluminide coating, and PWA 286, an overlay NiCoCrAlY coating. To obtain constitutive and/or fatigue data, tests were conducted on coated and uncoated PWA 1480 specimens tensilely loaded in the 100 , 110 , 111 , and 123 directions. A literature survey of constitutive models was completed for both single crystal alloys and metallic coating materials; candidate models were selected. One constitutive model under consideration for single crystal alloys applies Walker's micromechanical viscoplastic formulation to all slip systems participating in the single crystal deformation. The constitutive models for the overlay coating correlate the viscoplastic data well. For the aluminide coating, a unique test method is under development. LCF and TMF tests are underway. The two coatings caused a significant drop in fatigue life, and each produced a much different failure mechanism.

Improving scanner wafer alignment performance by target optimization

NASA Astrophysics Data System (ADS)

Leray, Philippe; Jehoul, Christiane; Socha, Robert; Menchtchikov, Boris; Raghunathan, Sudhar; Kent, Eric; Schoonewelle, Hielke; Tinnemans, Patrick; Tuffy, Paul; Belen, Jun; Wise, Rich

2016-03-01

In the process nodes of 10nm and below, the patterning complexity along with the processing and materials required has resulted in a need to optimize alignment targets in order to achieve the required precision, accuracy and throughput performance. Recent industry publications on the metrology target optimization process have shown a move from the expensive and time consuming empirical methodologies, towards a faster computational approach. ASML's Design for Control (D4C) application, which is currently used to optimize YieldStar diffraction based overlay (DBO) metrology targets, has been extended to support the optimization of scanner wafer alignment targets. This allows the necessary process information and design methodology, used for DBO target designs, to be leveraged for the optimization of alignment targets. In this paper, we show how we applied this computational approach to wafer alignment target design. We verify the correlation between predictions and measurements for the key alignment performance metrics and finally show the potential alignment and overlay performance improvements that an optimized alignment target could achieve.

Polymer concrete overlay on SH-51, bridge deck

NASA Astrophysics Data System (ADS)

Borg, T. M.

1982-06-01

A thin resinous overlay was placed on a sound bridge deck in Oklahoma to evaluate its performance over one year using various physical tests. The evaluation shows how well the overlay protects the reinforcing steel from corrosion due to deicing salts. The steps leading to the construction of the overlay are detailed as well as the actual placing of the overlay. The results of various physical tests are reported for both before and after the overlay.

Impact of design features on pavement response and performance in rehabilitated flexible and rigid pavements.

DOT National Transportation Integrated Search

2011-10-01

The primary focus of this research was to determine the effects of design and construction features, such as overlay : thickness and mix type, presence of milling, and type of restoration, on pavement response and performance and to : establish their...

Aerodynamic design and analysis system for supersonic aircraft. Part 3: Computer program description

NASA Technical Reports Server (NTRS)

Middleton, W. D.; Lundry, J. L.; Coleman, R. G.

1975-01-01

The computer program for the design and analysis of supersonic aircraft configurations is presented. The schematics of the program structure are provided. The individual overlays and subroutines are described. The system is useful in determining surface pressures and supersonic area rule concepts.

Man's role in integrated control and information management systems

NASA Technical Reports Server (NTRS)

Nevins, J. L.; Johnson, I. S.

1972-01-01

Display control considerations associated with avionics techniques are discussed. General purpose displays and a prototype interactive display/command design featuring a pushplate CRT overlay for command input are considered.

High-throughput electrical characterization for robust overlay lithography control

NASA Astrophysics Data System (ADS)

Devender, Devender; Shen, Xumin; Duggan, Mark; Singh, Sunil; Rullan, Jonathan; Choo, Jae; Mehta, Sohan; Tang, Teck Jung; Reidy, Sean; Holt, Jonathan; Kim, Hyung Woo; Fox, Robert; Sohn, D. K.

2017-03-01

Realizing sensitive, high throughput and robust overlay measurement is a challenge in current 14nm and advanced upcoming nodes with transition to 300mm and upcoming 450mm semiconductor manufacturing, where slight deviation in overlay has significant impact on reliability and yield1). Exponentially increasing number of critical masks in multi-patterning lithoetch, litho-etch (LELE) and subsequent LELELE semiconductor processes require even tighter overlay specification2). Here, we discuss limitations of current image- and diffraction- based overlay measurement techniques to meet these stringent processing requirements due to sensitivity, throughput and low contrast3). We demonstrate a new electrical measurement based technique where resistance is measured for a macro with intentional misalignment between two layers. Overlay is quantified by a parabolic fitting model to resistance where minima and inflection points are extracted to characterize overlay control and process window, respectively. Analyses using transmission electron microscopy show good correlation between actual overlay performance and overlay obtained from fitting. Additionally, excellent correlation of overlay from electrical measurements to existing image- and diffraction- based techniques is found. We also discuss challenges of integrating electrical measurement based approach in semiconductor manufacturing from Back End of Line (BEOL) perspective. Our findings open up a new pathway for accessing simultaneous overlay as well as process window and margins from a robust, high throughput and electrical measurement approach.

Does Gender Influence Colour Choice in the Treatment of Visual Stress?

PubMed Central

Conway, Miriam L.; Evans, Bruce J. W.; Evans, Josephine C.; Suttle, Catherine M.

2016-01-01

Purpose Visual Stress (VS) is a condition in which words appear blurred, in motion, or otherwise distorted when reading. Some people diagnosed with VS find that viewing black text on white paper through coloured overlays or precision tinted lenses (PTLs) reduces symptoms attributed to VS. The aim of the present study is to determine whether the choice of colour of overlays or PTLs is influenced by a patient’s gender. Methods Records of all patients attending a VS assessment in two optometry practices between 2009 and 2014 were reviewed retrospectively. Patients who reported a significant and consistent reduction in symptoms with either overlay and or PTL were included in the analysis. Overlays and PTLs were categorized as stereotypical male, female or neutral colours based on gender preferences as described in the literature. Chi-square analysis was carried out to determine whether gender (across all ages or within age groups) was associated with overlay or PTL colour choice. Results 279 patients (133 males and 146 females, mean age 17 years) consistently showed a reduction in symptoms with an overlay and were included. Chi-square analysis revealed no significant association between the colour of overlay chosen and male or female gender (Chi-square 0.788, p = 0.674). 244 patients (120 males and 124 females, mean age 24.5 years) consistently showed a reduction in symptoms with PTLs and were included. Chi-square analysis revealed a significant association between stereotypical male/female/neutral colours of PTLs chosen and male/female gender (Chi-square 6.46, p = 0.040). More males preferred stereotypical male colour PTLs including blue and green while more females preferred stereotypical female colour PTLs including pink and purple. Conclusions For some VS patients, the choice of PTL colour is influenced not only by the alleviation of symptoms but also by other non-visual factors such as gender. PMID:27648842

Sputter-ion plating of coatings for protection of gas-turbine blades against high-temperature oxidation and corrosion

NASA Technical Reports Server (NTRS)

Coad, J. P.; Restall, J. E.

1982-01-01

Considerable effort is being devoted to the development of overlay coatings for protecting critical components such as turbine blades against high-temperature oxidation, corrosion, and erosion damage in service. The most commercially advanced methods for depositing coatings are electron-beam evaporation and plasma spraying. Sputter-ion plating (SIP) offers a potentially cheaper and simpler alternative method for depositing overlays. Experimental work on SIP of Co-Cr-Al-Y and Ni-Cr-Al-Ti alloy coatings is described. Results are presented of metallographic assessment of these coatings, and of the results obtained from high-velocity testing using a gas-turbine simulator rig.

Solving next generation (1x node) metrology challenges using advanced CDSEM capabilities: tilt, high energy and backscatter imaging

NASA Astrophysics Data System (ADS)

Zhang, Xiaoxiao; Snow, Patrick W.; Vaid, Alok; Solecky, Eric; Zhou, Hua; Ge, Zhenhua; Yasharzade, Shay; Shoval, Ori; Adan, Ofer; Schwarzband, Ishai; Bar-Zvi, Maayan

2015-03-01

Traditional metrology solutions are facing a range of challenges at the 1X node such as three dimensional (3D) measurement capabilities, shrinking overlay and critical dimension (CD) error budgets driven by multi-patterning and via in trench CD measurements. Hybrid metrology offers promising new capabilities to address some of these challenges but it will take some time before fully realized. This paper explores new capabilities currently offered on the in-line Critical Dimension Scanning Electron Microscope (CD-SEM) to address these challenges and enable the CD-SEM to move beyond measuring bottom CD using top down imaging. Device performance is strongly correlated with Fin geometry causing an urgent need for 3D measurements. New beam tilting capabilities enhance the ability to make 3D measurements in the front-end-of-line (FEOL) of the metal gate FinFET process in manufacturing. We explore these new capabilities for measuring Fin height and build upon the work communicated last year at SPIE1. Furthermore, we extend the application of the tilt beam to the back-end-of-line (BEOL) trench depth measurement and demonstrate its capability in production targeting replacement of the existing Atomic Force Microscope (AFM) measurements by including the height measurement in the existing CDSEM recipe to reduce fab cycle time. In the BEOL, another increasingly challenging measurement for the traditional CD-SEM is the bottom CD of the self-aligned via (SAV) in a trench first via last (TFVL) process. Due to the extremely high aspect ratio of the structure secondary electron (SE) collection from the via bottom is significantly reduced requiring the use of backscatter electrons (BSE) to increase the relevant image quality. Even with this solution, the resulting images are difficult to measure with advanced technology nodes. We explore new methods to increase measurement robustness and combine this with novel segmentation-based measurement algorithm generated specifically for BSE images. The results will be contrasted with data from previously used methods to quantify the improvement. We also compare the results to electrical test data to evaluate and quantify the measurement performance improvements. Lastly, according to International Technology Roadmap for Semiconductors (ITRS) from 2013, the overlay 3 sigma requirement will be 3.3 nm in 2015 and 2.9 nm in 2016. Advanced lithography requires overlay measurement in die on features resembling the device geometry. However, current optical overlay measurement is performed in the scribe line on large targets due to optical diffraction limit. In some cases, this limits the usefulness of the measurement since it does not represent the true behavior of the device. We explore using high voltage imaging to help address this urgent need. Novel CD-SEM based overlay targets that optimize the restrictions of process geometry and SEM technique were designed and spread out across the die. Measurements are done on these new targets both after photolithography and etch. Correlation is drawn between the two measurements. These results will also be compared to conventional optical overlay measurement approaches and we will discuss the possibility of using this capability in high volume manufacturing.

A Graphic Overlay Method for Selection of Osteotomy Site in Chronic Radial Head Dislocation: An Evaluation of 3D-printed Bone Models.

PubMed

Kim, Hui Taek; Ahn, Tae Young; Jang, Jae Hoon; Kim, Kang Hee; Lee, Sung Jae; Jung, Duk Young

2017-03-01

Three-dimensional (3D) computed tomography imaging is now being used to generate 3D models for planning orthopaedic surgery, but the process remains time consuming and expensive. For chronic radial head dislocation, we have designed a graphic overlay approach that employs selected 3D computer images and widely available software to simplify the process of osteotomy site selection. We studied 5 patients (2 traumatic and 3 congenital) with unilateral radial head dislocation. These patients were treated with surgery based on traditional radiographs, but they also had full sets of 3D CT imaging done both before and after their surgery: these 3D CT images form the basis for this study. From the 3D CT images, each patient generated 3 sets of 3D-printed bone models: 2 copies of the preoperative condition, and 1 copy of the postoperative condition. One set of the preoperative models was then actually osteotomized and fixed in the manner suggested by our graphic technique. Arcs of rotation of the 3 sets of 3D-printed bone models were then compared. Arcs of rotation of the 3 groups of bone models were significantly different, with the models osteotomized accordingly to our graphic technique having the widest arcs. For chronic radial head dislocation, our graphic overlay approach simplifies the selection of the osteotomy site(s). Three-dimensional-printed bone models suggest that this approach could improve range of motion of the forearm in actual surgical practice. Level IV-therapeutic study.

Voice over internet protocol with prepaid calling card solutions

NASA Astrophysics Data System (ADS)

Gunadi, Tri

2001-07-01

The VoIP technology is growing up rapidly, it has big network impact on PT Telkom Indonesia, the bigger telecommunication operator in Indonesia. Telkom has adopted VoIP and one other technology, Intelligent Network (IN). We develop those technologies together in one service product, called Internet Prepaid Calling Card (IPCC). IPCC is becoming new breakthrough for the Indonesia telecommunication services especially on VoIP and Prepaid Calling Card solutions. Network architecture of Indonesia telecommunication consists of three layer, Local, Tandem and Trunck Exchange layer. Network development researches for IPCC architecture are focus on network overlay hierarchy, Internet and PSTN. With this design hierarchy the goal of Interworking PSTN, VoIP and IN calling card, become reality. Overlay design for IPCC is not on Trunck Exchange, this is the new architecture, these overlay on Tandem and Local Exchange, to make the faster call processing. The nodes added: Gateway (GW) and Card Management Center (CMC) The GW do interfacing between PSTN and Internet Network used ISDN-PRA and Ethernet. The other functions are making bridge on circuit (PSTN) with packet (VoIP) based and real time billing process. The CMC used for data storage, pin validation, report activation, tariff system, directory number and all the administration transaction. With two nodes added the IPCC service offered to the market.

Method of manufacturing a heat pipe wick with structural enhancement

DOEpatents

Andraka, Charles E [Albuquerque, NM; Adkins, Douglas R [Albuquerque, NM; Moreno, James B [Albuquerque, NM; Rawlinson, K Scott [Albuquerque, NM; Showalter, Steven K [Albuquerque, NM; Moss, Timothy A [Albuquerque, NM

2006-10-24

Heat pipe wick structure wherein a stout sheet of perforated material overlays a high performance wick material such as stainless steel felt affixed to a substrate. The inventive structure provides a good flow path for working fluid while maintaining durability and structural stability independent of the structure (or lack of structure) associated with the wick material. In one described embodiment, a wick of randomly laid .about.8 micron thickness stainless steel fibers is sintered to a metal substrate and a perforated metal overlay.

The effect of coloured overlays and lenses on reading: a systematic review of the literature.

PubMed

Griffiths, Philip G; Taylor, Robert H; Henderson, Lisa M; Barrett, Brendan T

2016-09-01

There are many anecdotal claims and research reports that coloured lenses and overlays improve reading performance. Here we present the results of a systematic review of this literature and examine the quality of the evidence. We systematically reviewed the literature concerning the effect of coloured lenses or overlays on reading performance by searching the PsychInfo, Medline and Embase databases. This revealed 51 published items (containing 54 data sets). Given that different systems are in use for issuing coloured overlays or lenses, we reviewed the evidence under four separate system headings (Intuitive, Irlen, Harris/Chromagen and Other), classifying each published item using the Cochrane Risk of Bias tool. Although the different colour systems have been subjected to different amounts of scientific scrutiny, the results do not differ according to the system type, or whether the sample under investigation was classified as having visual stress (or a similarly defined condition), reading difficulty, or both. The majority of studies are subject to 'high' or 'uncertain' risk of bias in one or more key aspects of study design or outcome, with studies at lower risk from bias providing less support for the benefit of coloured lenses/overlays on reading ability. While many studies report improvements with coloured lenses, the effect size is generally small and/or similar to the improvement found with a placebo condition. We discuss the strengths and shortcomings of the published literature and, whilst acknowledging the difficulties associated with conducting trials of this type, offer some suggestions about how future trials might be conducted. Consistent with previous reviews and advice from several professional bodies, we conclude that the use of coloured lenses or overlays to ameliorate reading difficulties cannot be endorsed and that any benefits reported by individuals in clinical settings are likely to be the result of placebo, practice or Hawthorne effects. © 2016 The Authors Ophthalmic & Physiological Optics © 2016 The College of Optometrists.

ODOT research news : fall 2007.

DOT National Transportation Integrated Search

2007-01-01

The newsletter includes: : 1) Several manufacturers have designed geosynthetic products to prevent or lessen reflective cracking. The materials are supposed to minimize tension transferred to the overlay from the existing pavement. : 2) Results of th...

75 FR 51161 - Notice of Passenger Facility Charge (PFC) Approvals and Disapprovals

Federal Register 2010, 2011, 2012, 2013, 2014

2010-08-18

... approach path indicator systems. By-pass taxiway and hold apron. Master plan update. Airfield signage... mandates. Concourse A and B. Overlay taxiway C and connectors. Engineer/design airfield signage...

An Overlay Architecture for Throughput Optimal Multipath Routing

DTIC Science & Technology

2017-01-14

1 An Overlay Architecture for Throughput Optimal Multipath Routing Nathaniel M. Jones, Georgios S. Paschos, Brooke Shrader, and Eytan Modiano...decisions. In this work, we study an overlay architecture for dynamic routing such that only a subset of devices (overlay nodes) need to make dynamic routing...a legacy network. Network overlays are frequently used to deploy new communication architectures in legacy networks [13]. To accomplish this, messages

Conceptual transitions in methods of skull-photo superimposition that impact the reliability of identification: a review.

PubMed

Jayaprakash, Paul T

2015-01-01

Establishing identification during skull-photo superimposition relies on correlating the salient morphological features of an unidentified skull with those of a face-image of a suspected dead individual using image overlay processes. Technical progression in the process of overlay has included the incorporation of video cameras, image-mixing devices and software that enables real-time vision-mixing. Conceptual transitions occur in the superimposition methods that involve 'life-size' images, that achieve orientation of the skull to the posture of the face in the photograph and that assess the extent of match. A recent report on the reliability of identification using the superimposition method adopted the currently prevalent methods and suggested an increased rate of failures when skulls were compared with related and unrelated face images. The reported reduction in the reliability of the superimposition method prompted a review of the transition in the concepts that are involved in skull-photo superimposition. The prevalent popular methods for visualizing the superimposed images at less than 'life-size', overlaying skull-face images by relying on the cranial and facial landmarks in the frontal plane when orienting the skull for matching and evaluating the match on a morphological basis by relying on mix-mode alone are the major departures in the methodology that may have reduced the identification reliability. The need to reassess the reliability of the method that incorporates the concepts which have been considered appropriate by the practitioners is stressed. Copyright © 2014 Elsevier Ireland Ltd. All rights reserved.

Interactive 3D segmentation using connected orthogonal contours.

PubMed

de Bruin, P W; Dercksen, V J; Post, F H; Vossepoel, A M; Streekstra, G J; Vos, F M

2005-05-01

This paper describes a new method for interactive segmentation that is based on cross-sectional design and 3D modelling. The method represents a 3D model by a set of connected contours that are planar and orthogonal. Planar contours overlayed on image data are easily manipulated and linked contours reduce the amount of user interaction.1 This method solves the contour-to-contour correspondence problem and can capture extrema of objects in a more flexible way than manual segmentation of a stack of 2D images. The resulting 3D model is guaranteed to be free of geometric and topological errors. We show that manual segmentation using connected orthogonal contours has great advantages over conventional manual segmentation. Furthermore, the method provides effective feedback and control for creating an initial model for, and control and steering of, (semi-)automatic segmentation methods.

Human-Robot Interaction Directed Research Project

NASA Technical Reports Server (NTRS)

Sandor, Aniko; Cross, Ernest V., II; Chang, M. L.

2014-01-01

Human-robot interaction (HRI) is a discipline investigating the factors affecting the interactions between humans and robots. It is important to evaluate how the design of interfaces and command modalities affect the human's ability to perform tasks accurately, efficiently, and effectively when working with a robot. By understanding the effects of interface design on human performance, workload, and situation awareness, interfaces can be developed to appropriately support the human in performing tasks with minimal errors and with appropriate interaction time and effort. Thus, the results of research on human-robot interfaces have direct implications for the design of robotic systems. This DRP concentrates on three areas associated with interfaces and command modalities in HRI which are applicable to NASA robot systems: 1) Video Overlays, 2) Camera Views, and 3) Command Modalities. The first study focused on video overlays that investigated how Augmented Reality (AR) symbology can be added to the human-robot interface to improve teleoperation performance. Three types of AR symbology were explored in this study, command guidance (CG), situation guidance (SG), and both (SCG). CG symbology gives operators explicit instructions on what commands to input, whereas SG symbology gives operators implicit cues so that operators can infer the input commands. The combination of CG and SG provided operators with explicit and implicit cues allowing the operator to choose which symbology to utilize. The objective of the study was to understand how AR symbology affects the human operator's ability to align a robot arm to a target using a flight stick and the ability to allocate attention between the symbology and external views of the world. The study evaluated the effects type of symbology (CG and SG) has on operator tasks performance and attention allocation during teleoperation of a robot arm. The second study expanded on the first study by evaluating the effects of the type of navigational guidance (CG and SG) on operator task performance and attention allocation during teleoperation of a robot arm through uplinked commands. Although this study complements the first study on navigational guidance with hand controllers, it is a separate investigation due to the distinction in intended operators (i.e., crewmembers versus ground-operators). A third study looked at superimposed and integrated overlays for teleoperation of a mobile robot using a hand controller. When AR is superimposed on the external world, it appears to be fixed onto the display and internal to the operators' workstation. Unlike superimposed overlays, integrated overlays often appear as three-dimensional objects and move as if part of the external world. Studies conducted in the aviation domain show that integrated overlays can improve situation awareness and reduce the amount of deviation from the optimal path. The purpose of the study was to investigate whether these results apply to HRI tasks, such as navigation with a mobile robot. HRP GAPS This HRI research contributes to closure of HRP gaps by providing information on how display and control characteristics - those related to guidance, feedback, and command modalities - affect operator performance. The overarching goals are to improve interface usability, reduce operator error, and develop candidate guidelines to design effective human-robot interfaces.

Efficient hybrid metrology for focus, CD, and overlay

NASA Astrophysics Data System (ADS)

Tel, W. T.; Segers, B.; Anunciado, R.; Zhang, Y.; Wong, P.; Hasan, T.; Prentice, C.

2017-03-01

In the advent of multiple patterning techniques in semiconductor industry, metrology has progressively become a burden. With multiple patterning techniques such as Litho-Etch-Litho-Etch and Sidewall Assisted Double Patterning, the number of processing step have increased significantly and therefore, so as the amount of metrology steps needed for both control and yield monitoring. The amount of metrology needed is increasing in each and every node as more layers needed multiple patterning steps, and more patterning steps per layer. In addition to this, there is that need for guided defect inspection, which in itself requires substantially denser focus, overlay, and CD metrology as before. Metrology efficiency will therefore be cruicial to the next semiconductor nodes. ASML's emulated wafer concept offers a highly efficient method for hybrid metrology for focus, CD, and overlay. In this concept metrology is combined with scanner's sensor data in order to predict the on-product performance. The principle underlying the method is to isolate and estimate individual root-causes which are then combined to compute the on-product performance. The goal is to use all the information available to avoid ever increasing amounts of metrology.

SEM-based overlay measurement between via patterns and buried M1 patterns using high-voltage SEM

NASA Astrophysics Data System (ADS)

Hasumi, Kazuhisa; Inoue, Osamu; Okagawa, Yutaka; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Jehoul, Christiane

2017-03-01

The miniaturization of semiconductors continues, importance of overlay measurement is increasing. We measured overlay with analysis SEM called Miracle Eye which can output ultrahigh acceleration voltage in 1998. Meanwhile, since 2006, we have been working on SEM based overlay measurement and developed overlay measurement function of the same layer using CD-SEM. Then, we evaluated overlay of the same layer pattern after etching. This time, in order to measure overlay after lithography, we evaluated the see-through overlay using high voltage SEM CV5000 released in October 2016. In collaboration between imec and Hitachi High-Technologies, we evaluated repeatability, TIS of SEM-OVL as well as correlation between SEM-OVL and Opt-OVL in the M1@ADI and V0@ADI process. Repeatability and TIS results are reasonable and SEM-OVL has good correlation with Opt-OVL. By overlay measurement using CV 5000, we got the following conclusions. (1)SEM_OVL results of both M1 and V0 at ADI show good correlation to OPT_OVL. (2)High voltage SEM can prove the measurement capability of a small pattern(Less than 1 2um) like device that can be placed in-die area. (3)"In-die SEM based overlay" shows possibility for high order control of scanner

Peer Mentor Program for the General Chemistry Laboratory Designed to Improve Undergraduate STEM Retention

ERIC Educational Resources Information Center

Damkaci, Fehmi; Braun, Timothy F.; Gublo, Kristin

2017-01-01

We describe the design and implementation of an undergraduate peer mentor program that can overlay an existing general chemistry laboratory and is designed to improve STEM student retention. For the first four freshman cohorts going through the program, year-to-year retention improved by a four-year average of 20% for students in peer-mentored…

Graphical Data Analysis on the Circle: Wrap-Around Time Series Plots for (Interrupted) Time Series Designs.

PubMed

Rodgers, Joseph Lee; Beasley, William Howard; Schuelke, Matthew

2014-01-01

Many data structures, particularly time series data, are naturally seasonal, cyclical, or otherwise circular. Past graphical methods for time series have focused on linear plots. In this article, we move graphical analysis onto the circle. We focus on 2 particular methods, one old and one new. Rose diagrams are circular histograms and can be produced in several different forms using the RRose software system. In addition, we propose, develop, illustrate, and provide software support for a new circular graphical method, called Wrap-Around Time Series Plots (WATS Plots), which is a graphical method useful to support time series analyses in general but in particular in relation to interrupted time series designs. We illustrate the use of WATS Plots with an interrupted time series design evaluating the effect of the Oklahoma City bombing on birthrates in Oklahoma County during the 10 years surrounding the bombing of the Murrah Building in Oklahoma City. We compare WATS Plots with linear time series representations and overlay them with smoothing and error bands. Each method is shown to have advantages in relation to the other; in our example, the WATS Plots more clearly show the existence and effect size of the fertility differential.

Development Report for the 10 KW Sound Attenuation Program (Preproduction ’F’ Kit).

DTIC Science & Technology

1981-12-02

3.2 Panel Design The panels were to be constructed from solid aluminum sheet metal on all ex- ; terior surfaces and acoustic fiberglass or mineral ... wool bill overlayed with a synthetic film and encapsulated with perforated aluminum on the interior sur- faces. Per design, the acoustic panels on the

Use of dye to distinguish salt and protein crystals under microcrystallization conditions

NASA Technical Reports Server (NTRS)

Cosenza, Larry (Inventor); Gester, Thomas E. (Inventor); Bray, Terry L. (Inventor); DeLucas, Lawrence J. (Inventor); Hamrick, David T. (Inventor)

2007-01-01

An improved method of screening crystal growth conditions is provided wherein molecules are crystallized from solutions containing dyes. These dyes are selectively incorporated or associated with crystals of particular character thereby rendering crystals of particular character colored and improving detection of the dyed crystals. A preferred method involves use of dyes in protein solutions overlayed by oil. Use of oil allows the use of small volumes of solution and facilitates the screening of large numbers of crystallization conditions in arrays using automated devices that dispense appropriate solutions to generate crystallization trials, overlay crystallization trials with an oil, provide appropriate conditions conducive to crystallization and enhance detection of dyed (colored) or undyed (uncolored) crystals that result.

Human-Robot Interaction Directed Research Project

NASA Technical Reports Server (NTRS)

Sandor, Aniko; Cross, Ernest V., II; Chang, Mai Lee

2014-01-01

Human-robot interaction (HRI) is a discipline investigating the factors affecting the interactions between humans and robots. It is important to evaluate how the design of interfaces and command modalities affect the human's ability to perform tasks accurately, efficiently, and effectively when working with a robot. By understanding the effects of interface design on human performance, workload, and situation awareness, interfaces can be developed to appropriately support the human in performing tasks with minimal errors and with appropriate interaction time and effort. Thus, the results of research on human-robot interfaces have direct implications for the design of robotic systems. This DRP concentrates on three areas associated with interfaces and command modalities in HRI which are applicable to NASA robot systems: 1) Video Overlays, 2) Camera Views, and 3) Command Modalities. The first study focused on video overlays that investigated how Augmented Reality (AR) symbology can be added to the human-robot interface to improve teleoperation performance. Three types of AR symbology were explored in this study, command guidance (CG), situation guidance (SG), and both (SCG). CG symbology gives operators explicit instructions on what commands to input, whereas SG symbology gives operators implicit cues so that operators can infer the input commands. The combination of CG and SG provided operators with explicit and implicit cues allowing the operator to choose which symbology to utilize. The objective of the study was to understand how AR symbology affects the human operator's ability to align a robot arm to a target using a flight stick and the ability to allocate attention between the symbology and external views of the world. The study evaluated the effects type of symbology (CG and SG) has on operator tasks performance and attention allocation during teleoperation of a robot arm. The second study expanded on the first study by evaluating the effects of the type of navigational guidance (CG and SG) on operator task performance and attention allocation during teleoperation of a robot arm through uplinked commands. Although this study complements the first study on navigational guidance with hand controllers, it is a separate investigation due to the distinction in intended operators (i.e., crewmembers versus ground-operators). A third study looked at superimposed and integrated overlays for teleoperation of a mobile robot using a hand controller. When AR is superimposed on the external world, it appears to be fixed onto the display and internal to the operators' workstation. Unlike superimposed overlays, integrated overlays often appear as three-dimensional objects and move as if part of the external world. Studies conducted in the aviation domain show that integrated overlays can improve situation awareness and reduce the amount of deviation from the optimal path. The purpose of the study was to investigate whether these results apply to HRI tasks, such as navigation with a mobile robot.

Research notes : polymer concrete bridge deck overlays : Deschutes River Bridge (Biggs), Maupin Bridge (Maupin) : final report.

DOT National Transportation Integrated Search

1995-07-01

This report documents the construction and performance of two thin polymer concrete (with polyester/styrene resins) bridge deck overlays. The overlays were constructed in Biggs and Maupin, Oregon in June 1993. Construction of the overlays was less th...

Use of Hydrogen Chemisorption and Ethylene Hydrogenation as Predictors for Aqueous Phase Reforming of Lactose over Ni@Pt and Co@Pt Bimetallic Overlayer Catalysts

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lai, Qinghua; Skoglund, Michael D.; Zhang, Chen

Overlayer Pt on Ni (Ni@Pt) or Co (Co@Pt) were synthesized and tested for H2 generation from APR of lactose. H2 chemisorption descriptor showed that Ni@Pt and Co@Pt overlayer catalysts had reduced H2 adsorption strength compared to a Pt only catalyst, which agree with computational predictions. The overlayer catalysts also demonstrated lower activity for ethylene hydrogenation than the Pt only catalyst, which likely resulted from decreased H2 binding strength decreasing the surface coverage of H2. XAS results showed that overlayer catalysts exhibited higher white line intensity than the Pt catalyst, which indicates a negative d-band shift for the Pt overlayer, furthermore » providing evidence for overlayer formation. Lactose APR studies showed that lactose can be used as feedstock to produce H2 and CO under desirable reaction conditions. The Pt active sites of Ni@Pt and Co@Pt overlayer catalysts showed significantly enhanced H2 production selectivity and activity when compared with that of a Pt only catalyst. The single deposition overlayer with the largest d-band shift showed the highest H2 activity. The results suggest that overlayer formation using directed deposition technique could modify the behavior of the surface metal and ultimately modify the APR activity.« less

Description of the L1C signal

USGS Publications Warehouse

Betz, J.W.; Blanco, M.A.; Cahn, C.R.; Dafesh, P.A.; Hegarty, C.J.; Hudnut, K.W.; Kasemsri, V.; Keegan, R.; Kovach, K.; Lenahan, L.S.; Ma, H.H.; Rushanan, J.J.; Sklar, D.; Stansell, T.A.; Wang, C.C.; Yi, S.K.

2006-01-01

Detailed design of the modernized LI civil signal (L1C) signal has been completed, and the resulting draft Interface Specification IS-GPS-800 was released in Spring 2006. The novel characteristics of the optimized L1C signal design provide advanced capabilities while offering to receiver designers considerable flexibility in how to use these capabilities. L1C provides a number of advanced features, including: 75% of power in a pilot component for enhanced signal tracking, advanced Weilbased spreading codes, an overlay code on the pilot that provides data message synchronization, support for improved reading of clock and ephemeris by combining message symbols across messages, advanced forward error control coding, and data symbol interleaving to combat fading. The resulting design offers receiver designers the opportunity to obtain unmatched performance in many ways. This paper describes the design of L1C. A summary of LIC's background and history is provided. The signal description then proceeds with the overall signal structure consisting of a pilot component and a carrier component. The new L1C spreading code family is described, along with the logic used for generating these spreading codes. Overlay codes on the pilot channel are also described, as is the logic used for generating the overlay codes. Spreading modulation characteristics are summarized. The data message structure is also presented, showing the format for providing time, ephemeris, and system data to users, along with features that enable receivers to perform code combining. Encoding of rapidly changing time bits is described, as are the Low Density Parity Check codes used for forward error control of slowly changing time bits, clock, ephemeris, and system data. The structure of the interleaver is also presented. A summary of L 1C's unique features and their benefits is provided, along with a discussion of the plan for L1C implementation.

Geosynthetic materials in reflective crack prevention.

DOT National Transportation Integrated Search

2007-07-01

Reflective cracking due to shrinkage and brittleness in asphalt pavements can seriously degrade an asphalt overlay : before it is near the end of its design life. Geosynthetics have been used to impede the reflection of existing : transverse cracking...

Accelerated testing for studying pavement design and performance (FY 2004) : research summary.

DOT National Transportation Integrated Search

2009-03-01

The thirteenth full-scale Accelerated Pavement Test (APT) experiment at the Civil Infrastructure Laboratory (CISL) of Kansas State University aimed to determine the response and the failure mode of thin concrete overlays.

Geosynthetics for reflective crack control

DOT National Transportation Integrated Search

1999-03-01

Reflective cracking due to shrinkage and brittleness in asphalt pavements can seriously degrade an asphalt overlay before it is near its design life. Geosynthetics have been used to impede the reflection of existing transverse cracking to the new ove...

Development of improved overlay thickness design alternatives for local roads.

DOT National Transportation Integrated Search

2015-07-01

In this research study, 20 pavement sections were selected from six counties in Illinois, with varying : structural and traffic characteristics. Falling weight deflectometer (FWD) tests were conducted on these : road segments to determine and monitor...

Polymer concrete overlay on the Big Swan Creek Bridge : condition of overlay after two years in service.

DOT National Transportation Integrated Search

1986-01-01

The multiple-layer polymer concrete overlay on the Big Swan Creek Bridge was soundly bonded to the base concrete and providing excellent protection against the infiltration of chloride ions after 2 years in service. Evaluations of this and PC overlay...

Polymer concrete overlay on Beulah Road Bridge : interim report no. 1--installation and initial condition of overlay.

DOT National Transportation Integrated Search

1982-01-01

The installation of a thin polymer concrete overlay on the Beulah Road bridge demonstrates that an overlay of low permeability and high skid resistance can be successfully installed by maintenance forces with a minimum of disruption to traffic, appro...

Diffusion Barriers to Increase the Oxidative Life of Overlay Coatings

NASA Technical Reports Server (NTRS)

Nesbitt, James A.; Lei, Jih-Fen

1999-01-01

Currently, most blades and vanes in the hottest section of aero gas turbine engines require some type of coating for oxidation protection. Newly developed single crystal superalloys have the mechanical potential to operate at increasingly higher component temperatures. However, at these elevated temperatures, coating/substrate interdiffusion can shorten the protective life of the coating. Diffusion barriers between overlay coatings and substrates are being examined to extend the protective life of the coating. A previously- developed finite-difference diffusion model has been modified to predict the oxidative life enhancement due to use of a diffusion barrier. The original diffusion model, designated COSIM, simulates Al diffusion in the coating to the growing oxide scale as well as Al diffusion into the substrate. The COSIM model incorporates an oxide growth and spalling model to provide the rate of Al consumption during cyclic oxidation. Coating failure is predicted when the Al concentration at the coating surface drops to a defined critical level. The modified COSIM model predicts the oxidative life of an overlay coating when a diffusion barrier is present eliminating diffusion of Al from the coating into the substrate. Both the original and the modified diffusion models have been used to predict the effectiveness of a diffusion barrier in extending the protective life of a NiCrAl overlay coating undergoing cyclic oxidation at 1100 C.

Ductile film delamination from compliant substrates using hard overlayers

PubMed Central

Cordill, M.J.; Marx, V.M.; Kirchlechner, C.

2014-01-01

Flexible electronic devices call for copper and gold metal films to adhere well to polymer substrates. Measuring the interfacial adhesion of these material systems is often challenging, requiring the formulation of different techniques and models. Presented here is a strategy to induce well defined areas of delamination to measure the adhesion of copper films on polyimide substrates. The technique utilizes a stressed overlayer and tensile straining to cause buckle formation. The described method allows one to examine the effects of thin adhesion layers used to improve the adhesion of flexible systems. PMID:25641995

Ductile film delamination from compliant substrates using hard overlayers.

PubMed

Cordill, M J; Marx, V M; Kirchlechner, C

2014-11-28

Flexible electronic devices call for copper and gold metal films to adhere well to polymer substrates. Measuring the interfacial adhesion of these material systems is often challenging, requiring the formulation of different techniques and models. Presented here is a strategy to induce well defined areas of delamination to measure the adhesion of copper films on polyimide substrates. The technique utilizes a stressed overlayer and tensile straining to cause buckle formation. The described method allows one to examine the effects of thin adhesion layers used to improve the adhesion of flexible systems.

Ablative overlays for Space Shuttle leading edge ascent heat protection

NASA Technical Reports Server (NTRS)

Strauss, E. L.

1975-01-01

Ablative overlays were evaluated via a plasma-arc simulation of the ascent pulse on the leading edge of the Space Shuttle Orbiter. Overlay concepts included corkboard, polyisocyanurate foam, low-density Teflon, epoxy, and subliming salts. Their densities ranged from 4.9 to 81 lb per cu ft, and the thicknesses varied from 0.107 to 0.330 in. Swept-leading-edge models were fabricated from 30-lb per cu ft silicone-based ablators. The overlays were bonded to maintain the surface temperature of the base ablator below 500 F during ascent. Foams provided minimum-weight overlays, and subliming salts provided minimum-thickness overlays. Teflon left the most uniform surface after ascent heating.

Polymer concrete overlay on the Big Swan Creek Bridge : interim report no. 1--installation and initial condition of overlay.

DOT National Transportation Integrated Search

1984-01-01

The installation of a thin polymer concrete overlay on the Big Swan Creek Bridge provides further evidence that an overlay of low permeability can be soundly bonded to a concrete bridge deck by maintenance forces with a minimum of disruption to traff...

Final report : Polymer concrete overlay on Beulah Road Bridge : condition of overlay after one year in service.

DOT National Transportation Integrated Search

1983-01-01

An evaluation of the thin polymer concrete overlay placed on the Beulah Road bridge indicates that the overlay is securely bonded to the base concrete and is providing low permeability and high skid resistance after 1 year of service life. The lane c...

In-cell overlay metrology by using optical metrology tool

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, DongYoung; Oh, Eungryong; Choi, Ahlin; Park, Hyowon; Liang, Waley; Choi, DongSub; Kim, Nakyoon; Lee, Jeongpyo; Pandev, Stilian; Jeon, Sanghuck; Robinson, John C.

2018-03-01

Overlay is one of the most critical process control steps of semiconductor manufacturing technology. A typical advanced scheme includes an overlay feedback loop based on after litho optical imaging overlay metrology on scribeline targets. The after litho control loop typically involves high frequency sampling: every lot or nearly every lot. An after etch overlay metrology step is often included, at a lower sampling frequency, in order to characterize and compensate for bias. The after etch metrology step often involves CD-SEM metrology, in this case in-cell and ondevice. This work explores an alternative approach using spectroscopic ellipsometry (SE) metrology and a machine learning analysis technique. Advanced 1x nm DRAM wafers were prepared, including both nominal (POR) wafers with mean overlay offsets, as well as DOE wafers with intentional across wafer overlay modulation. After litho metrology was measured using optical imaging metrology, as well as after etch metrology using both SE and CD-SEM for comparison. We investigate 2 types of machine learning techniques with SE data: model-less and model-based, showing excellent performance for after etch in-cell on-device overlay metrology.

A map overlay error model based on boundary geometry

USGS Publications Warehouse

Gaeuman, D.; Symanzik, J.; Schmidt, J.C.

2005-01-01

An error model for quantifying the magnitudes and variability of errors generated in the areas of polygons during spatial overlay of vector geographic information system layers is presented. Numerical simulation of polygon boundary displacements was used to propagate coordinate errors to spatial overlays. The model departs from most previous error models in that it incorporates spatial dependence of coordinate errors at the scale of the boundary segment. It can be readily adapted to match the scale of error-boundary interactions responsible for error generation on a given overlay. The area of error generated by overlay depends on the sinuosity of polygon boundaries, as well as the magnitude of the coordinate errors on the input layers. Asymmetry in boundary shape has relatively little effect on error generation. Overlay errors are affected by real differences in boundary positions on the input layers, as well as errors in the boundary positions. Real differences between input layers tend to compensate for much of the error generated by coordinate errors. Thus, the area of change measured on an overlay layer produced by the XOR overlay operation will be more accurate if the area of real change depicted on the overlay is large. The model presented here considers these interactions, making it especially useful for estimating errors studies of landscape change over time. ?? 2005 The Ohio State University.

Human/Computer Interfacing in Educational Environments.

ERIC Educational Resources Information Center

Sarti, Luigi

1992-01-01

This discussion of educational applications of user interfaces covers the benefits of adopting database techniques in organizing multimedia materials; the evolution of user interface technology, including teletype interfaces, analogic overlay graphics, window interfaces, and adaptive systems; application design problems, including the…

Geosynthetics for reflective crack control : construction report.

DOT National Transportation Integrated Search

1999-03-01

Reflective cracking due to shrinkage and brittleness in asphalt pavements can seriously degrade an asphalt overlay before it is near its design life. Geosynthetics have been used to impede the reflection of existing transverse cracking to the new ove...

Performance life of HMA mixes : final report.

DOT National Transportation Integrated Search

2016-01-01

A number of hot mix asphalt (HMA) types, such as permeable friction course (PFC), stone mastic asphalts : (SMA), performance design mixes and conventional dense graded mixes are currently used to construct or overlay : roads. One of the important inp...

Design of a monitor and simulation terminal (master) for space station telerobotics and telescience

NASA Technical Reports Server (NTRS)

Lopez, L.; Konkel, C.; Harmon, P.; King, S.

1989-01-01

Based on Space Station and planetary spacecraft communication time delays and bandwidth limitations, it will be necessary to develop an intelligent, general purpose ground monitor terminal capable of sophisticated data display and control of on-orbit facilities and remote spacecraft. The basic elements that make up a Monitor and Simulation Terminal (MASTER) include computer overlay video, data compression, forward simulation, mission resource optimization and high level robotic control. Hardware and software elements of a MASTER are being assembled for testbed use. Applications of Neural Networks (NNs) to some key functions of a MASTER are also discussed. These functions are overlay graphics adjustment, object correlation and kinematic-dynamic characterization of the manipulator.

Human-Robot Interaction

NASA Technical Reports Server (NTRS)

Rochlis-Zumbado, Jennifer; Sandor, Aniko; Ezer, Neta

2012-01-01

Risk of Inadequate Design of Human and Automation/Robotic Integration (HARI) is a new Human Research Program (HRP) risk. HRI is a research area that seeks to understand the complex relationship among variables that affect the way humans and robots work together to accomplish goals. The DRP addresses three major HRI study areas that will provide appropriate information for navigation guidance to a teleoperator of a robot system, and contribute to the closure of currently identified HRP gaps: (1) Overlays -- Use of overlays for teleoperation to augment the information available on the video feed (2) Camera views -- Type and arrangement of camera views for better task performance and awareness of surroundings (3) Command modalities -- Development of gesture and voice command vocabularies

The Earth Resources Laboratory Applications Software (ELAS) in university research and education: An operator oriented geobased information system

NASA Technical Reports Server (NTRS)

Coker, B. L.; Kind, T. C.; Smith, W. F., Jr.; Weber, N. V.

1981-01-01

Created for analyzing and processing digital data such as that collected by multispectral scanners or digitized from maps, ELAS is designed for ease of user operation and includes its own FORTRAN operating monitor and an expandable set of application modules which are FORTRAN overlays. On those machines that do not support FORTRAN overlaying, the modules exist as subprograms. The subsystem can be implemented on most 16-bit or 32-bit machines and is capable of, but not limited to, operating on low-cost minicomputer systems. The recommended hardware configuration for ELAS and a representative listing of some operating and application modules are presented.

Evaluation of the construction and performance of multiple layer polymer concrete overlays : interim report no. 2, condition of the overlays after five years in service.

DOT National Transportation Integrated Search

1987-01-01

This interim report presents the results after 5 years of a study undertaken to evaluate multiple layer polymer concrete overlays over a 10-year period. The report indicates that an overlay of low permeability and high skid resistance can be successf...

Patterned wafer geometry grouping for improved overlay control

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Woo, Jaeson; Park, Junbeom; Song, Changrock; Anis, Fatima; Vukkadala, Pradeep; Jeon, Sanghuck; Choi, DongSub; Huang, Kevin; Heo, Hoyoung; Smith, Mark D.; Robinson, John C.

2017-03-01

Process-induced overlay errors from outside the litho cell have become a significant contributor to the overlay error budget including non-uniform wafer stress. Previous studies have shown the correlation between process-induced stress and overlay and the opportunity for improvement in process control, including the use of patterned wafer geometry (PWG) metrology to reduce stress-induced overlay signatures. Key challenges of volume semiconductor manufacturing are how to improve not only the magnitude of these signatures, but also the wafer to wafer variability. This work involves a novel technique of using PWG metrology to provide improved litho-control by wafer-level grouping based on incoming process induced overlay, relevant for both 3D NAND and DRAM. Examples shown in this study are from 19 nm DRAM manufacturing.

Advanced overlay: sampling and modeling for optimized run-to-run control

NASA Astrophysics Data System (ADS)

Subramany, Lokesh; Chung, WoongJae; Samudrala, Pavan; Gao, Haiyong; Aung, Nyan; Gomez, Juan Manuel; Gutjahr, Karsten; Park, DongSuk; Snow, Patrick; Garcia-Medina, Miguel; Yap, Lipkong; Demirer, Onur Nihat; Pierson, Bill; Robinson, John C.

2016-03-01

In recent years overlay (OVL) control schemes have become more complicated in order to meet the ever shrinking margins of advanced technology nodes. As a result, this brings up new challenges to be addressed for effective run-to- run OVL control. This work addresses two of these challenges by new advanced analysis techniques: (1) sampling optimization for run-to-run control and (2) bias-variance tradeoff in modeling. The first challenge in a high order OVL control strategy is to optimize the number of measurements and the locations on the wafer, so that the "sample plan" of measurements provides high quality information about the OVL signature on the wafer with acceptable metrology throughput. We solve this tradeoff between accuracy and throughput by using a smart sampling scheme which utilizes various design-based and data-based metrics to increase model accuracy and reduce model uncertainty while avoiding wafer to wafer and within wafer measurement noise caused by metrology, scanner or process. This sort of sampling scheme, combined with an advanced field by field extrapolated modeling algorithm helps to maximize model stability and minimize on product overlay (OPO). Second, the use of higher order overlay models means more degrees of freedom, which enables increased capability to correct for complicated overlay signatures, but also increases sensitivity to process or metrology induced noise. This is also known as the bias-variance trade-off. A high order model that minimizes the bias between the modeled and raw overlay signature on a single wafer will also have a higher variation from wafer to wafer or lot to lot, that is unless an advanced modeling approach is used. In this paper, we characterize the bias-variance trade off to find the optimal scheme. The sampling and modeling solutions proposed in this study are validated by advanced process control (APC) simulations to estimate run-to-run performance, lot-to-lot and wafer-to- wafer model term monitoring to estimate stability and ultimately high volume manufacturing tests to monitor OPO by densely measured OVL data.

Design of a Mobile Agent-Based Adaptive Communication Middleware for Federations of Critical Infrastructure Simulations

NASA Astrophysics Data System (ADS)

Görbil, Gökçe; Gelenbe, Erol

The simulation of critical infrastructures (CI) can involve the use of diverse domain specific simulators that run on geographically distant sites. These diverse simulators must then be coordinated to run concurrently in order to evaluate the performance of critical infrastructures which influence each other, especially in emergency or resource-critical situations. We therefore describe the design of an adaptive communication middleware that provides reliable and real-time one-to-one and group communications for federations of CI simulators over a wide-area network (WAN). The proposed middleware is composed of mobile agent-based peer-to-peer (P2P) overlays, called virtual networks (VNets), to enable resilient, adaptive and real-time communications over unreliable and dynamic physical networks (PNets). The autonomous software agents comprising the communication middleware monitor their performance and the underlying PNet, and dynamically adapt the P2P overlay and migrate over the PNet in order to optimize communications according to the requirements of the federation and the current conditions of the PNet. Reliable communications is provided via redundancy within the communication middleware and intelligent migration of agents over the PNet. The proposed middleware integrates security methods in order to protect the communication infrastructure against attacks and provide privacy and anonymity to the participants of the federation. Experiments with an initial version of the communication middleware over a real-life networking testbed show that promising improvements can be obtained for unicast and group communications via the agent migration capability of our middleware.

The Assessment of Distortion in Neurosurgical Image Overlay Projection.

PubMed

Vakharia, Nilesh N; Paraskevopoulos, Dimitris; Lang, Jozsef; Vakharia, Vejay N

2016-02-01

Numerous studies have demonstrated the superiority of neuronavigation during neurosurgical procedures compared to non-neuronavigation-based procedures. Limitations to neuronavigation systems include the need for the surgeons to avert their gaze from the surgical field and the cost of the systems, especially for hospitals in developing countries. Overlay projection of imaging directly onto the patient allows localization of intracranial structures. A previous study using overlay projection demonstrated the accuracy of image coregistration for a lesion in the temporal region but did not assess image distortion when projecting onto other anatomical locations. Our aim is to quantify this distortion and establish which regions of the skull would be most suitable for overlay projection. Using the difference in size of a square grid when projected onto an anatomically accurate model skull and a flat surface, from the same distance, we were able to calculate the degree of image distortion when projecting onto the skull from the anterior, posterior, superior, and lateral aspects. Measuring the size of a square when projected onto a flat surface from different distances allowed us to model change in lesion size when projecting a deep structure onto the skull surface. Using 2 mm as the upper limit for distortion, our results show that images can be accurately projected onto the majority (81.4%) of the surface of the skull. Our results support the use of image overlay projection in regions with ≤2 mm distortion to assist with localization of intracranial lesions at a fraction of the cost of existing methods. © The Author(s) 2015.

Usability of a real-time tracked augmented reality display system in musculoskeletal injections

NASA Astrophysics Data System (ADS)

Baum, Zachary; Ungi, Tamas; Lasso, Andras; Fichtinger, Gabor

2017-03-01

PURPOSE: Image-guided needle interventions are seldom performed with augmented reality guidance in clinical practice due to many workspace and usability restrictions. We propose a real-time optically tracked image overlay system to make image-guided musculoskeletal injections more efficient and assess its usability in a bed-side clinical environment. METHODS: An image overlay system consisting of an optically tracked viewbox, tablet computer, and semitransparent mirror allows users to navigate scanned patient volumetric images in real-time using software built on the open-source 3D Slicer application platform. A series of experiments were conducted to evaluate the latency and screen refresh rate of the system using different image resolutions. To assess the usability of the system and software, five medical professionals were asked to navigate patient images while using the overlay and completed a questionnaire to assess the system. RESULTS: In assessing the latency of the system with scanned images of varying size, screen refresh rates were approximately 5 FPS. The study showed that participants found using the image overlay system easy, and found the table-mounted system was significantly more usable and effective than the handheld system. CONCLUSION: It was determined that the system performs comparably with scanned images of varying size when assessing the latency of the system. During our usability study, participants preferred the table-mounted system over the handheld. The participants also felt that the system itself was simple to use and understand. With these results, the image overlay system shows promise for use in a clinical environment.

The design of a tactical situation display

NASA Astrophysics Data System (ADS)

Kuperman, Gilbert G.; Wilson, Denise L.

The design and demonstration of a dynamic tactical situation display applicable to an advanced conceptual bomber crew system is discussed. The display is the primary source of mission pacing and situational awareness information in the Strategic Avionics Battle-Management Evaluation and Research (SABER) simulator. Aspects of the display design are described, including primary data items, horizontal situation display, point of interest indication, terrain data, graphics overlay, text window, and presentation modes.

Diffraction based overlay re-assessed

NASA Astrophysics Data System (ADS)

Leray, Philippe; Laidler, David; D'havé, Koen; Cheng, Shaunee

2011-03-01

In recent years, numerous authors have reported the advantages of Diffraction Based Overlay (DBO) over Image Based Overlay (IBO), mainly by comparison of metrology figures of merit such as TIS and TMU. Some have even gone as far as to say that DBO is the only viable overlay metrology technique for advanced technology nodes; 22nm and beyond. Typically the only reported drawback of DBO is the size of the required targets. This severely limits its effective use, when all critical layers of a product, including double patterned layers need to be measured, and in-die overlay measurements are required. In this paper we ask whether target size is the only limitation to the adoption of DBO for overlay characterization and control, or are there other metrics, which need to be considered. For example, overlay accuracy with respect to scanner baseline or on-product process overlay control? In this work, we critically re-assess the strengths and weaknesses of DBO for the applications of scanner baseline and on-product process layer overlay control. A comprehensive comparison is made to IBO. For on product process layer control we compare the performance on critical process layers; Gate, Contact and Metal. In particularly we focus on the response of the scanner to the corrections determined by each metrology technique for each process layer, as a measure of the accuracy. Our results show that to characterize an overlay metrology technique that is suitable for use in advanced technology nodes requires much more than just evaluating the conventional metrology metrics of TIS and TMU.

Passivation of surface states of α-Fe2O3(0001) surface by deposition of Ga2O3 overlayers: A density functional theory study.

PubMed

Ulman, Kanchan; Nguyen, Manh-Thuong; Seriani, Nicola; Gebauer, Ralph

2016-03-07

There is a big debate in the community regarding the role of surface states of hematite in the photoelectrochemical water splitting. Experimental studies on non-catalytic overlayers passivating the hematite surface states claim a favorable reduction in the overpotential for the water splitting reaction. As a first step towards understanding the effect of these overlayers, we have studied the system Ga2O3 overlayers on hematite (0001) surfaces using first principles computations in the PBE+U framework. Our computations suggest that stoichiometric terminations of Ga2O3 overlayers are energetically more favored than the bare surface, at ambient oxygen chemical potentials. Energetics suggest that the overlayers prefer to grow via a layer-plus-island (Stranski-Krastanov) growth mode with a critical layer thickness of 1-2 layers. Thus, a complete wetting of the hematite surface by an overlayer of gallium oxide is thermodynamically favored. We establish that the effect of deposition of the Ga2O3 overlayers on the bare hematite surface is to passivate the surface states for the stoichiometric termination. For the oxygen terminated surface which is the most stable termination under photoelectrochemical conditions, the effect of deposition of the Ga2O3 overlayer is to passivate the hole-trapping surface state.

Installation and performance of lightweight aggregate asphaltic concrete test sections.

DOT National Transportation Integrated Search

1970-01-01

In 1966 and 1968 test sections of asphaltic concrete overlays fabricated with coarse lightweight aggregate and fine limestone were installed in the Roanoke-Bedford area. The experimental mixes used were designed in an attempt to develop skid resistan...

Assessment of asphalt interlayer designed on jointed concrete : [tech transfer summary].

DOT National Transportation Integrated Search

2014-11-01

Based on the substantial reduction in reflective cracking and only marginal : cost increases from using the interlayer on this research project, it is : recommended that future hot mix asphalt (HMA) overlay projects in Iowa : consider using the crack...

Two Dimensional Array Based Overlay Network for Balancing Load of Peer-to-Peer Live Video Streaming

NASA Astrophysics Data System (ADS)

Faruq Ibn Ibrahimy, Abdullah; Rafiqul, Islam Md; Anwar, Farhat; Ibn Ibrahimy, Muhammad

2013-12-01

The live video data is streaming usually in a tree-based overlay network or in a mesh-based overlay network. In case of departure of a peer with additional upload bandwidth, the overlay network becomes very vulnerable to churn. In this paper, a two dimensional array-based overlay network is proposed for streaming the live video stream data. As there is always a peer or a live video streaming server to upload the live video stream data, so the overlay network is very stable and very robust to churn. Peers are placed according to their upload and download bandwidth, which enhances the balance of load and performance. The overlay network utilizes the additional upload bandwidth of peers to minimize chunk delivery delay and to maximize balance of load. The procedure, which is used for distributing the additional upload bandwidth of the peers, distributes the additional upload bandwidth to the heterogeneous strength peers in a fair treat distribution approach and to the homogeneous strength peers in a uniform distribution approach. The proposed overlay network has been simulated by Qualnet from Scalable Network Technologies and results are presented in this paper.

Mechanistic interpretation of nondestructive pavement testing deflections

NASA Astrophysics Data System (ADS)

Hoffman, M. S.; Thompson, M. R.

1981-06-01

A method for the back calculation of material properties in flexible pavements based on the interpretation of surface deflection measurements is proposed. The ILLI-PAVE, a stress-dependent finite element pavement model, was used to generate data for developing algorithms and nomographs for deflection basin interpretation. Twenty four different flexible pavement sections throughout the State of Illinois were studied. Deflections were measured and loading mode effects on pavement response were investigated. The factors controlling the pavement response to different loading modes are identified and explained. Correlations between different devices are developed. The back calculated parameters derived from the proposed evaluation procedure can be used as inputs for asphalt concrete overlay design.

Understanding overlay signatures using machine learning on non-lithography context information

NASA Astrophysics Data System (ADS)

Overcast, Marshall; Mellegaard, Corey; Daniel, David; Habets, Boris; Erley, Georg; Guhlemann, Steffen; Thrun, Xaver; Buhl, Stefan; Tottewitz, Steven

2018-03-01

Overlay errors between two layers can be caused by non-lithography processes. While these errors can be compensated by the run-to-run system, such process and tool signatures are not always stable. In order to monitor the impact of non-lithography context on overlay at regular intervals, a systematic approach is needed. Using various machine learning techniques, significant context parameters that relate to deviating overlay signatures are automatically identified. Once the most influential context parameters are found, a run-to-run simulation is performed to see how much improvement can be obtained. The resulting analysis shows good potential for reducing the influence of hidden context parameters on overlay performance. Non-lithographic contexts are significant contributors, and their automatic detection and classification will enable the overlay roadmap, given the corresponding control capabilities.

Towards integration of PET/MR hybrid imaging into radiation therapy treatment planning

DOE Office of Scientific and Technical Information (OSTI.GOV)

Paulus, Daniel H., E-mail: daniel.paulus@imp.uni-erlangen.de; Thorwath, Daniela; Schmidt, Holger

2014-07-15

Purpose: Multimodality imaging has become an important adjunct of state-of-the-art radiation therapy (RT) treatment planning. Recently, simultaneous PET/MR hybrid imaging has become clinically available and may also contribute to target volume delineation and biological individualization in RT planning. For integration of PET/MR hybrid imaging into RT treatment planning, compatible dedicated RT devices are required for accurate patient positioning. In this study, prototype RT positioning devices intended for PET/MR hybrid imaging are introduced and tested toward PET/MR compatibility and image quality. Methods: A prototype flat RT table overlay and two radiofrequency (RF) coil holders that each fix one flexible body matrixmore » RF coil for RT head/neck imaging have been evaluated within this study. MR image quality with the RT head setup was compared to the actual PET/MR setup with a dedicated head RF coil. PET photon attenuation and CT-based attenuation correction (AC) of the hardware components has been quantitatively evaluated by phantom scans. Clinical application of the new RT setup in PET/MR imaging was evaluated in anin vivo study. Results: The RT table overlay and RF coil holders are fully PET/MR compatible. MR phantom and volunteer imaging with the RT head setup revealed high image quality, comparable to images acquired with the dedicated PET/MR head RF coil, albeit with 25% reduced SNR. Repositioning accuracy of the RF coil holders was below 1 mm. PET photon attenuation of the RT table overlay was calculated to be 3.8% and 13.8% for the RF coil holders. With CT-based AC of the devices, the underestimation error was reduced to 0.6% and 0.8%, respectively. Comparable results were found within the patient study. Conclusions: The newly designed RT devices for hybrid PET/MR imaging are PET and MR compatible. The mechanically rigid design and the reproducible positioning allow for straightforward CT-based AC. The systematic evaluation within this study provides the technical basis for the clinical integration of PET/MR hybrid imaging into RT treatment planning.« less

IMPROVEMENT OF EFFICIENCY OF CUT AND OVERLAY ASPHALT WORKS BY USING MOBILE MAPPING SYSTEM

NASA Astrophysics Data System (ADS)

Yabuki, Nobuyoshi; Nakaniwa, Kazuhide; Kidera, Hiroki; Nishi, Daisuke

When the cut-and-overlay asphalt work is done for improving road pavement, conventional road surface elevation survey with levels often requires traffic regulation and takes much time and effort. Recently, although new surveying methods using non-prismatic total stations or fixed 3D laser scanners have been proposed in industry, they have not been adopted much due to their high cost. In this research, we propose a new method using Mobile Mapping Systems (MMS) in order to increase the efficiency and to reduce the cost. In this method, small white marks are painted at the intervals of 10m along the road to identify cross sections and to modify the elevations of the white marks with accurate survey data. To verify this proposed method, we executed an experiment and compared this method with the conventional level survey method and the fixed 3D laser scanning method at a road of Osaka University. The result showed that the proposed method had a similar accuracy with other methods and it was more efficient.

Ridge preservation comparing socket allograft alone to socket allograft plus facial overlay xenograft: a clinical and histologic study in humans.

PubMed

Poulias, Evmenios; Greenwell, Henry; Hill, Margaret; Morton, Dean; Vidal, Ricardo; Shumway, Brian; Peterson, Thomas L

2013-11-01

Previous studies of ridge preservation showed a loss of ≈18% or 1.5 mm of crestal ridge width in spite of treatment. The primary aim of this randomized, controlled, masked clinical trial is to compare a socket graft to the same treatment plus a buccal overlay graft, both with a polylactide membrane, to determine if loss of ridge width can be prevented by use of an overlay graft. Twelve patients who served as positive controls received an intrasocket mineralized cancellous allograft (socket group), and 12 patients received the same socket graft procedure plus buccal overlay cancellous xenograft (overlay group). Horizontal ridge dimensions were measured with a digital caliper, and vertical ridge changes were measured from a stent. Before implant placement, at 4 months, a trephine core was obtained for histologic analysis. The mean horizontal ridge width at the crest for the socket group decreased from 8.7 ± 1.0 to 7.1 ± 1.5 mm for a mean loss of 1.6 ± 0.8 mm (P <0.05), whereas the same measurement for the overlay group decreased from 8.4 ± 1.4 to 8.1 ± 1.4 mm for a mean loss of 0.3 ± 0.9 mm (P >0.05). The overlay group was significantly different from the socket group (P <0.05). Histologic analysis revealed that the socket group had 35% ± 16% vital bone, and the overlay group had 40% ± 16% (P >0.05). The overlay treatment significantly prevented loss of ridge width and preserved or augmented the buccal contour. The socket and overlay groups healed with a high percentage of vital bone.

A slotted cathodic protection system for bridge decks.

DOT National Transportation Integrated Search

1985-01-01

A non-overlay, slotted cathodic protection system was installed two years ago on a concrete bridge deck in Virginia. The design, installation, and operation of this system are fairly straightforward. A protective current density of 1.6 mA/ft (17 mA...

Teleseminars and Teacher Education. Research Report.

ERIC Educational Resources Information Center

Edwards, Peter; Sofo, Frank

This exploratory study developed instructional materials designed to maximize learning through individual and group interaction and used the materials to examine the effectiveness of a teleseminar approach for interactive distance presentations. In this teleseminar model, duplicate sets of overhead transparencies with overlays and other materials…

Improved overlay tester for fatigue cracking resistance of asphalt mixtures.

DOT National Transportation Integrated Search

2017-01-01

Premature cracking of the asphalt concrete (AC) layer in flexible pavement is one of the major concerns of the pavement community. Over the past decade, AC mixes have been designed using the Hamburg wheel-tracking device to improve their rutting pote...

Assessment of design parameters and construction requirements for full depth reclamation projects with cement.

DOT National Transportation Integrated Search

2015-02-01

The ability to efficiently rehabilitate and maintain the State of Vermonts Highway infrastructure in a : cost-effective manner is a daunting task. Historically, pavement overlay treatments were specified : because it was a rapid low cost solution ...

Historical data learning based dynamic LSP routing for overlay IP/MPLS over WDM networks

NASA Astrophysics Data System (ADS)

Yu, Xiaojun; Xiao, Gaoxi; Cheng, Tee Hiang

2013-08-01

Overlay IP/MPLS over WDM network is a promising network architecture starting to gain wide deployments recently. A desirable feature of such a network is to achieve efficient routing with limited information exchanges between the IP/MPLS and the WDM layers. This paper studies dynamic label switched path (LSP) routing in the overlay IP/MPLS over WDM networks. To enhance network performance while maintaining its simplicity, we propose to learn from the historical data of lightpath setup costs maintained by the IP-layer integrated service provider (ISP) when making routing decisions. Using a novel historical data learning scheme for logical link cost estimation, we develop a new dynamic LSP routing method named Existing Link First (ELF) algorithm. Simulation results show that the proposed algorithm significantly outperforms the existing ones under different traffic loads, with either limited or unlimited numbers of optical ports. Effects of the number of candidate routes, add/drop ratio and the amount of historical data are also evaluated.

Type A polymer concrete overlay field trials : final report.

DOT National Transportation Integrated Search

1984-12-01

This report describes placement and subsequent performance of two methyl methacrylate polymer concrete overlays. Performance is evaluated as to: 1) the mixing and placement characteristics of the methyl methacrylate polymer concretes as overlay mater...

Fabrication of magnetic bubble memory overlay

NASA Technical Reports Server (NTRS)

1973-01-01

Self-contained magnetic bubble memory overlay is fabricated by process that employs epitaxial deposition to form multi-layered complex of magnetically active components on single chip. Overlay fabrication comprises three metal deposition steps followed by subtractive etch.

Hot cracking susceptibility of Alloy 52M weld overlays onto CF8 stainless steel

NASA Astrophysics Data System (ADS)

Chu, H. A.; Young, M. C.; Chu, H. C.; Tsay, L. W.; Chen, C.

2013-02-01

In this study, weld overlays of Alloy 52M (a nickel-based filler metal) onto CF8 stainless steel (SS) were performed using the gas tungsten arc welding process. Hot cracking in the weld overlays was observed particularly near the interfacial region of the Alloy 52M/CF8 weld overlay. In general, the hot cracks were most likely to occur at the sites with high dilution rates, e.g., at the weld start/end locations of a single pass or in the first and second passes in multi-pass overlays. The region near the weld interface between Alloy 52M and the CF8 SS had a higher hot cracking tendency than the other regions. It was found that the dilution rate and the formation of eutectic-type constituents (i.e., γ/NbC) both played significant roles in the determination of the hot cracking susceptibility of these weld overlays. Nevertheless, hot cracks were entirely eliminated by proper deposition of a SS buffer layer prior to overlaying with Alloy 52M.

Using fuzzy logic analysis for siting decisions of infiltration trenches for highway runoff control.

PubMed

Ki, Seo Jin; Ray, Chittaranjan

2014-09-15

Determining optimal locations for best management practices (BMPs), including their field considerations and limitations, plays an important role for effective stormwater management. However, these issues have been often overlooked in modeling studies that focused on downstream water quality benefits. This study illustrates the methodology of locating infiltration trenches at suitable locations from spatial overlay analyses which combine multiple layers that address different aspects of field application into a composite map. Using seven thematic layers for each analysis, fuzzy logic was employed to develop a site suitability map for infiltration trenches, whereas the DRASTIC method was used to produce a groundwater vulnerability map on the island of Oahu, Hawaii, USA. In addition, the analytic hierarchy process (AHP), one of the most popular overlay analyses, was used for comparison to fuzzy logic. The results showed that the AHP and fuzzy logic methods developed significantly different index maps in terms of best locations and suitability scores. Specifically, the AHP method provided a maximum level of site suitability due to its inherent aggregation approach of all input layers in a linear equation. The most eligible areas in locating infiltration trenches were determined from the superposition of the site suitability and groundwater vulnerability maps using the fuzzy AND operator. The resulting map successfully balanced qualification criteria for a low risk of groundwater contamination and the best BMP site selection. The results of the sensitivity analysis showed that the suitability scores were strongly affected by the algorithms embedded in fuzzy logic; therefore, caution is recommended with their use in overlay analysis. Accordingly, this study demonstrates that the fuzzy logic analysis can not only be used to improve spatial decision quality along with other overlay approaches, but also is combined with general water quality models for initial and refined searches for the best locations of BMPs at the sub-basin level. Copyright © 2014. Published by Elsevier B.V.

New overlay measurement technique with an i-line stepper using embedded standard field image alignment marks for wafer bonding applications

NASA Astrophysics Data System (ADS)

Kulse, P.; Sasai, K.; Schulz, K.; Wietstruck, M.

2017-06-01

In the last decades the semiconductor technology has been driven by Moore's law leading to high performance CMOS technologies with feature sizes of less than 10 nm [1]. It has been pointed out that not only scaling but also the integration of novel components and technology modules into CMOS/BiCMOS technologies is becoming more attractive to realize smart and miniaturized systems [2]. Driven by new applications in the area of communication, health and automation, new components and technology modules such as BiCMOS embedded RF-MEMS, high-Q passives, Sibased microfluidics and InP-SiGe BiCMOS heterointegration have been demonstrated [3-6]. In contrast to standard VLSI processes fabricated on front side of the silicon wafer, these new technology modules require addition backside processing of the wafer; thus an accurate alignment between the front and backside of the wafer is mandatory. In previous work an advanced back to front side alignment technique and implementation into IHP's 0.25/0.13 μm high performance SiGe:C BiCMOS backside process module has been presented [7]. The developed technique enables a high resolution and accurate lithography on the backside of BiCMOS wafer for additional backside processing. In addition to the aforementioned back side process technologies, new applications like Through-Silicon Vias (TSV) for interposers and advanced substrate technologies for 3D heterogeneous integration demand not only single wafer fabrication but also processing of wafer stacks provided by temporary and permanent wafer bonding [8]. Therefore, the available overlay measurement techniques are not suitable if overlay and alignment marks are realized at the bonding interface of a wafer stack which consists of both a silicon device and a silicon carrier wafer. The former used EVG 40NT automated overlay measurement system, which use two opposite positioned microscopes inspecting simultaneous the wafer back and front side, is not capable measuring embedded overlay marks. In this work, the non-contact infrared alignment system of the Nikon i-line Stepper NSR-SF150 for both the alignment and the overlay determination of bonded wafer stacks with embedded alignment marks are used to achieve an accurate alignment between the different wafer sides. The embedded field image alignment (FIA) marks of the interface and the device wafer top layer are measured in a single measurement job. By taking the offsets between all different FIA's into account, after correcting the wafer rotation induced FIA position errors, hence an overlay for the stacked wafers can be determined. The developed approach has been validated by a standard back to front side application. The overlay was measured and determined using both, the EVG NT40 automated measurement system with special overlay marks and the measurement of the FIA marks of the front and back side layer. A comparison of both results shows mismatches in x and y translations smaller than 200 nm, which is relatively small compared to the overlay tolerances of +/-500 nm for the back to front side process. After the successful validation of the developed technique, special wafer stacks with FIA alignment marks in the bonding interface are fabricated. Due to the super IR light transparency of both doubled side polished wafers, the embedded FIA marks generate a stable and clear signal for accurate x and y wafer coordinate positioning. The FIA marks of the device wafer top layer were measured under standard condition in a developed photoresist mask without IR illumination. Following overlay calculation shows an overlay of less than 200 nm, which enables very accurate process condition for highly scaled TSV integration and advanced substrate integration into IHP's 0.25/0.13 μm SiGe:C BiCMOS technology. The presented method can be applied for both the standard back to front side process technologies and also new temporary and permanent wafer bonding applications.

Improved performance of JPCP overlays.

DOT National Transportation Integrated Search

2013-07-01

The overall performance of Michigan concrete overlays has been good. However, some recent JPCP overlay projects have developed premature distress with signs of pumping. It is suspected that lack of drainage was the main cause for the distresses rangi...

Tack coat optimization for HMA overlays laboratory testing.

DOT National Transportation Integrated Search

2008-09-01

Interface bonding between hot-mix asphalt (HMA) overlays and Portland cement concrete (PCC) pavements can be one of the most : significant factors affecting overlay service life. Various factors may affect the bonding condition at the interface, incl...

Very-Early-Strength Latex-Modified Concrete Overlays

DOT National Transportation Integrated Search

1998-12-01

This report describes the installation and condition of the first two very-early-strength latex-modified concrete (LMC-VE) overlays to be constructed for the Virginia Department of Transportation. The overlays were prepared with a special blended cem...

Very-early-strength latex-modified concrete overlay.

DOT National Transportation Integrated Search

1998-12-01

This paper describes the installation and condition of the first two very-early-strength latex modified concrete (LMC-VE) overlays constructed for the Virginia Department of Transportation. The overlays were prepared with a special blended cement rat...

Repair, Evaluation, Maintenance, and Rehabilitation Research Program Overlays on Horizontal Concrete Surfaces: Case Histories

DTIC Science & Technology

1994-02-01

ash, silica-fume, polymer -modified, polymer , and fiber - reinforced concretes. For some nonstructural repairs, unbonded overlays have been employed in an...which silica fume was included; polymer -modified concrete overlay, one in which a polymer admixture had been included; and fiber - reinforced concrete...of pumps. However, a determination has not been made for the source of leakage. 56 Chapter 6 Polymer -Modified Concrete Overlays 7 Fiber - Reinforced

Accuracy optimization with wavelength tunability in overlay imaging technology

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Kang, Yoonshik; Han, Sangjoon; Shim, Kyuchan; Hong, Minhyung; Kim, Seungyoung; Lee, Jieun; Lee, Dongyoung; Oh, Eungryong; Choi, Ahlin; Kim, Youngsik; Marciano, Tal; Klein, Dana; Hajaj, Eitan M.; Aharon, Sharon; Ben-Dov, Guy; Lilach, Saltoun; Serero, Dan; Golotsvan, Anna

2018-03-01

As semiconductor manufacturing technology progresses and the dimensions of integrated circuit elements shrink, overlay budget is accordingly being reduced. Overlay budget closely approaches the scale of measurement inaccuracies due to both optical imperfections of the measurement system and the interaction of light with geometrical asymmetries of the measured targets. Measurement inaccuracies can no longer be ignored due to their significant effect on the resulting device yield. In this paper we investigate a new approach for imaging based overlay (IBO) measurements by optimizing accuracy rather than contrast precision, including its effect over the total target performance, using wavelength tunable overlay imaging metrology. We present new accuracy metrics based on theoretical development and present their quality in identifying the measurement accuracy when compared to CD-SEM overlay measurements. The paper presents the theoretical considerations and simulation work, as well as measurement data, for which tunability combined with the new accuracy metrics is shown to improve accuracy performance.

Influence of curing time, overlay material and thickness on three light-curing composites used for luting indirect composite restorations.

PubMed

D'Arcangelo, Camillo; De Angelis, Francesco; Vadini, Mirco; Carluccio, Fabio; Vitalone, Laura Merla; D'Amario, Maurizio

2012-08-01

To assess the microhardness of three resin composites employed in the adhesive luting of indirect composite restorations and examine the influence of the overlay material and thickness as well as the curing time on polymerization rate. Three commercially available resin composites were selected: Enamel Plus HRI (Micerium) (ENA), Saremco ELS (Saremco Dental) (SAR), Esthet-X HD (Dentsply/DeTrey) (EST-X). Post-polymerized cylinders of 6 different thicknesses were produced and used as overlays: 2 mm, 3 mm, 3.5 mm, 4 mm, 5 mm, and 6 mm. Two-mm-thick disks were produced and employed as underlays. A standardized amount of composite paste was placed between the underlay and the overlay surfaces which were maintained at a fixed distance of 0.5 mm. Light curing of the luting composite layer was performed through the overlays for 40, 80, or 120 s. For each specimen, the composite to be cured, the cured overlay, and the underlay were made out of the same batch of resin composite. All specimens were assigned to three experimental groups on the basis of the resin composite used, and to subgroups on the basis of the overlay thickness and the curing time, resulting in 54 experimental subgroups (n = 5). Forty-five additional specimens, 15 for each material under investigation, were produced and subjected to 40, 80, or 120 s of light curing using a microscope glass as an overlay; they were assigned to 9 control subgroups (n = 5). Three Vicker's hardness (VH) indentations were performed on each specimen. Means and standard deviations were calculated. Data were statistically analyzed using 3-way ANOVA. Within the same material, VH values lower than 55% of control were not considered acceptable. The used material, the overlay thickness, and the curing time significantly influenced VH values. In the ENA group, acceptable hardness values were achieved with 3.5-mm or thinner overlays after 120 or 80 s curing time (VH 41.75 and 39.32, respectively), and with 2-mm overlays after 40 s (VH 54.13). In the SAR group, acceptable hardness values were only achieved with 2-mm-thick overlays after 120 or 80 s curing time (VH 39.81 and 29.78, respectively). In the EST-X group, acceptable hardness values were only achieved with 3-mm or thinner overlays, after 120 or 80 s curing time (VH 36.20 and 36.03, respectively). Curing time, restoration thickness, and overlay material significantly influenced the microhardness of the tested resin composites employed as luting agents. The clinician should carefully keep these factors under control.

TxACOL workshop : Texas asphalt concrete overlay design and analysis system.

DOT National Transportation Integrated Search

2010-01-01

General Information: : -Two workshops were held respectively on Aug. 25 at Paris, Tx and on Oct. 6 at Austin, Tx, : -More than 30 representatives from TxDOT attended, : -Introduction of TxACOL software, key input parameters, and related lab and field...

Efficacy of coloured overlays and lenses for treating reading difficulty: an overview of systematic reviews.

PubMed

Suttle, Catherine M; Lawrenson, John G; Conway, Miriam L

2018-04-06

Coloured overlays or lenses are widely available for use by children and adults with difficulties or discomfort while reading. In recent years, systematic reviews have been conducted in an attempt to establish the strength of the evidence base for this intervention. The aim of this overview is to systematically review these reviews. The methodology was published prospectively as a protocol (Prospero CRD42017059172). Online databases Medline, Cinahl, Embase and the Cochrane Library were searched for systematic reviews on the efficacy of coloured overlays or lenses for the alleviation of reading difficulty or discomfort. Included studies were appraised using the AMSTAR 2 checklist. Characteristics of included studies such as aspects of methods, results and conclusions were recorded. Both processes were conducted independently by two reviewers and any discrepancies were resolved by discussion. Thirty-one studies were found via databases and other sources. After excluding duplicates and those not fitting the inclusion criteria, four reviews were included in the analysis. While all reviews were systematic, their methodology, results and conclusions differed. Three of the four concluded that there is insufficient good quality evidence to support the use of coloured overlays or lenses for reading difficulty, while one concluded that, despite research limitations, the evidence does support their use. On balance, systematic reviews to date indicate that there is not yet a reliable evidence base on which to recommend coloured overlays or lenses for the alleviation of reading difficulty or discomfort. High quality, low bias research is needed to investigate their effectiveness in different forms of reading difficulty and discomfort for adults and children. © 2018 Optometry Australia.

Ultrasound-ultrasound image overlay fusion improves real-time control of radiofrequency ablation margin in the treatment of hepatocellular carcinoma.

PubMed

Minami, Yasunori; Minami, Tomohiro; Hagiwara, Satoru; Ida, Hiroshi; Ueshima, Kazuomi; Nishida, Naoshi; Murakami, Takamichi; Kudo, Masatoshi

2018-05-01

To assess the clinical feasibility of US-US image overlay fusion with evaluation of the ablative margin in radiofrequency ablation (RFA) for hepatocellular carcinoma (HCC). Fifty-three patients with 68 HCCs measuring 0.9-4.0 cm who underwent RFA guided by US-US overlay image fusion were included in this retrospective study. By an overlay of pre-/postoperative US, the tumor image could be projected onto the ablative hyperechoic zone. Therefore, the ablative margin three-dimensionally could be shown during the RFA procedure. US-US image overlay was compared to dynamic CT a few days after RFA for assessment of early treatment response. Accuracy of graded response was calculated, and the performance of US-US image overlay fusion was compared with that of CT using a Kappa agreement test. Technically effective ablation was achieved in a single session, and 59 HCCs (86.8 %) succeeded in obtaining a 5-mm margin on CT. The response with US-US image overlay correctly predicted early CT evaluation with an accuracy of 92.6 % (63/68) (k = 0.67; 95 % CI: 0.39-0.95). US-US image overlay fusion can be proposed as a feasible guidance in RFA with a safety margin and predicts early response of treatment assessment with high accuracy. • US-US image overlay fusion visualizes the ablative margin during RFA procedure. • Visualizing the margin during the procedure can prompt immediate complementary treatment. • US image fusion correlates with the results of early evaluation CT.

Augmenting reality in Direct View Optical (DVO) overlay applications

NASA Astrophysics Data System (ADS)

Hogan, Tim; Edwards, Tim

2014-06-01

The integration of overlay displays into rifle scopes can transform precision Direct View Optical (DVO) sights into intelligent interactive fire-control systems. Overlay displays can provide ballistic solutions within the sight for dramatically improved targeting, can fuse sensor video to extend targeting into nighttime or dirty battlefield conditions, and can overlay complex situational awareness information over the real-world scene. High brightness overlay solutions for dismounted soldier applications have previously been hindered by excessive power consumption, weight and bulk making them unsuitable for man-portable, battery powered applications. This paper describes the advancements and capabilities of a high brightness, ultra-low power text and graphics overlay display module developed specifically for integration into DVO weapon sight applications. Central to the overlay display module was the development of a new general purpose low power graphics controller and dual-path display driver electronics. The graphics controller interface is a simple 2-wire RS-232 serial interface compatible with existing weapon systems such as the IBEAM ballistic computer and the RULR and STORM laser rangefinders (LRF). The module features include multiple graphics layers, user configurable fonts and icons, and parameterized vector rendering, making it suitable for general purpose DVO overlay applications. The module is configured for graphics-only operation for daytime use and overlays graphics with video for nighttime applications. The miniature footprint and ultra-low power consumption of the module enables a new generation of intelligent DVO systems and has been implemented for resolutions from VGA to SXGA, in monochrome and color, and in graphics applications with and without sensor video.

Cracking and debonding of a thin fiber reinforced concrete overlay.

DOT National Transportation Integrated Search

2017-04-01

Previous field studies suggested that macro-fibers incorporated in thin overlay pavements will result in reduced crack opening widths, vertical deflections, and debonding rates compared to that of unreinforced overlays. A simple finite element (FE) m...

High early strength latex modified concrete overlay.

DOT National Transportation Integrated Search

1988-01-01

This report describes the condition of the first high early strength latex modified concrete (LMC-HE) overlay to be constructed for the Virginia Department of Transportation. The overlay was prepared with type III cement and with more cement and less...

Intra-field on-product overlay improvement by application of RegC and TWINSCAN corrections

NASA Astrophysics Data System (ADS)

Sharoni, Ofir; Dmitriev, Vladimir; Graitzer, Erez; Perets, Yuval; Gorhad, Kujan; van Haren, Richard; Cekli, Hakki E.; Mulkens, Jan

2015-03-01

The on product overlay specification and Advanced Process Control (APC) is getting extremely challenging particularly after the introduction of multi-patterning applications like Spacer Assisted Double Patterning (SADP) and multipatterning techniques like N-repetitive Litho-Etch steps (LEN, N >= 2). When the latter is considered, most of the intrafield overlay contributors drop out of the overlay budget. This is a direct consequence of the fact that the scanner settings (like dose, illumination settings, etc.) as well as the subsequent processing steps can be made very similar for two consecutive Litho-Etch layers. The major overlay contributor that may require additional attention is the Image Placement Error (IPE). When the inter-layer overlay is considered, controlling the intra-field overlay contribution gets more complicated. In addition to the IPE contribution, the TWINSCANTM lens fingerprint in combination with the exposure settings is going to play a role as well. Generally speaking, two subsequent functional layers have different exposure settings. This results in a (non-reticle) additional overlay contribution. In this paper, we have studied the wafer overlay correction capability by RegC® in addition to the TWINSCANTM intrafield corrections to improve the on product overlay performance. RegC® is a reticle intra-volume laser writing technique that causes a predictable deformation element (RegC® deformation element) inside the quartz (Qz) material of a reticle. This technique enables to post-process an existing reticle to correct for instance for IPE. Alternatively, a pre-determined intra-field fingerprint can be added to the reticle such that it results in a straight field after exposure. This second application might be very powerful to correct for instance for (cold) lens fingerprints that cannot be corrected by the scanner itself. Another possible application is the intra-field processing fingerprint. One should realize that a RegC® treatment of a reticle generally results in global distortion of the reticle. This is not a problem as long as these global distortions can be corrected by the TWINSCANTM system (currently up to the third order). It is anticipated that the combination of the RegC® and the TWINSCANTM corrections act as complementary solutions. These solutions perfectly fit into the ASML Litho InSight (LIS) product in which feedforward and feedback corrections based on YieldStar overlay measurements are used to improve the on product overlay.

The polarization of Sb overlayers on NiMnSb(100)

NASA Astrophysics Data System (ADS)

Komesu, Takashi; Borca, C. N.; Jeong, Hae-Kyung; Dowben, P. A.; Ristoiu, Delia; Nozières, J. P.; Stadler, Shane; Idzerda, Y. U.

2000-08-01

We have investigated the induced polarization of paramagnetic Sb overlayers on the Heusler alloy NiMnSb. From combined X-ray absorption spectroscopy (XAS) and spin-polarized inverse photoemission spectroscopy (SPIPES), we can assign some of the unoccupied states of the Heusler alloy NiMnSb. With increasing thickness of the Sb overlayer, there is a decline in the density of states near the Fermi energy, as expected for a semimetal overlayer on a metallic substrate. While the Sb is polarized by the ferromagnetic NiMnSb substrate, consistent with the expectations of mean field theory, the polarization at the center of the surface/overlayer Brillouin zone cannot be easily related to the induced magnetization.

Visualizations of Travel Time Performance Based on Vehicle Reidentification Data

DOE Office of Scientific and Technical Information (OSTI.GOV)

Young, Stanley Ernest; Sharifi, Elham; Day, Christopher M.

This paper provides a visual reference of the breadth of arterial performance phenomena based on travel time measures obtained from reidentification technology that has proliferated in the past 5 years. These graphical performance measures are revealed through overlay charts and statistical distribution as revealed through cumulative frequency diagrams (CFDs). With overlays of vehicle travel times from multiple days, dominant traffic patterns over a 24-h period are reinforced and reveal the traffic behavior induced primarily by the operation of traffic control at signalized intersections. A cumulative distribution function in the statistical literature provides a method for comparing traffic patterns from variousmore » time frames or locations in a compact visual format that provides intuitive feedback on arterial performance. The CFD may be accumulated hourly, by peak periods, or by time periods specific to signal timing plans that are in effect. Combined, overlay charts and CFDs provide visual tools with which to assess the quality and consistency of traffic movement for various periods throughout the day efficiently, without sacrificing detail, which is a typical byproduct of numeric-based performance measures. These methods are particularly effective for comparing before-and-after median travel times, as well as changes in interquartile range, to assess travel time reliability.« less

Development of a Direct Spectrophotometric and Chemometric Method for Determining Food Dye Concentrations.

PubMed

Arroz, Erin; Jordan, Michael; Dumancas, Gerard G

2017-07-01

An ultraviolet visible (UV-Vis) spectrophotometric and partial least squares (PLS) chemometric method was developed for the simultaneous determination of erythrosine B (red), Brilliant Blue, and tartrazine (yellow) dyes. A training set (n = 64) was generated using a full factorial design and its accuracy was tested in a test set (n = 13) using a Box-Behnken design. The test set garnered a root mean square error (RMSE) of 1.79 × 10 -7 for blue, 4.59 × 10 -7 for red, and 1.13 × 10 -6 for yellow dyes. The relatively small RMSE suggests only a small difference between predicted versus measured concentrations, demonstrating the accuracy of our model. The relative error of prediction (REP) for the test set were 11.73%, 19.52%, 19.38%, for blue, red, and yellow dyes, respectively. A comparable overlay between the actual candy samples and their replicated synthetic spectra were also obtained indicating the model as a potentially accurate method for determining concentrations of dyes in food samples.

Effect of a Dielectric Overlay on a Linearly Tapered Slot Antenna Excited by a Coplanar Waveguide

NASA Technical Reports Server (NTRS)

Simons, Rainee N.; Lee, Richard Q.; Perl, Thomas D.; Silvestro, John

1993-01-01

The effect of a dielectric overlay on a linearly tapered slot antenna (LTSA) is studied. The LTSA under study has very wide bandwidth and excellent radiation patterns. A dielectric overlay improves the patterns and directivity of the antenna by increasing the electrical length and effective aperture of the antenna. A dielectric overlay can also be used to reduce the physical length of the antenna without compromising the pattern quality.

Reduction of wafer-edge overlay errors using advanced correction models, optimized for minimal metrology requirements

NASA Astrophysics Data System (ADS)

Kim, Min-Suk; Won, Hwa-Yeon; Jeong, Jong-Mun; Böcker, Paul; Vergaij-Huizer, Lydia; Kupers, Michiel; Jovanović, Milenko; Sochal, Inez; Ryan, Kevin; Sun, Kyu-Tae; Lim, Young-Wan; Byun, Jin-Moo; Kim, Gwang-Gon; Suh, Jung-Joon

2016-03-01

In order to optimize yield in DRAM semiconductor manufacturing for 2x nodes and beyond, the (processing induced) overlay fingerprint towards the edge of the wafer needs to be reduced. Traditionally, this is achieved by acquiring denser overlay metrology at the edge of the wafer, to feed field-by-field corrections. Although field-by-field corrections can be effective in reducing localized overlay errors, the requirement for dense metrology to determine the corrections can become a limiting factor due to a significant increase of metrology time and cost. In this study, a more cost-effective solution has been found in extending the regular correction model with an edge-specific component. This new overlay correction model can be driven by an optimized, sparser sampling especially at the wafer edge area, and also allows for a reduction of noise propagation. Lithography correction potential has been maximized, with significantly less metrology needs. Evaluations have been performed, demonstrating the benefit of edge models in terms of on-product overlay performance, as well as cell based overlay performance based on metrology-to-cell matching improvements. Performance can be increased compared to POR modeling and sampling, which can contribute to (overlay based) yield improvement. Based on advanced modeling including edge components, metrology requirements have been optimized, enabling integrated metrology which drives down overall metrology fab footprint and lithography cycle time.

Overlay improvement by exposure map based mask registration optimization

NASA Astrophysics Data System (ADS)

Shi, Irene; Guo, Eric; Chen, Ming; Lu, Max; Li, Gordon; Li, Rivan; Tian, Eric

2015-03-01

Along with the increased miniaturization of semiconductor electronic devices, the design rules of advanced semiconductor devices shrink dramatically. [1] One of the main challenges of lithography step is the layer-to-layer overlay control. Furthermore, DPT (Double Patterning Technology) has been adapted for the advanced technology node like 28nm and 14nm, corresponding overlay budget becomes even tighter. [2][3] After the in-die mask registration (pattern placement) measurement is introduced, with the model analysis of a KLA SOV (sources of variation) tool, it's observed that registration difference between masks is a significant error source of wafer layer-to-layer overlay at 28nm process. [4][5] Mask registration optimization would highly improve wafer overlay performance accordingly. It was reported that a laser based registration control (RegC) process could be applied after the pattern generation or after pellicle mounting and allowed fine tuning of the mask registration. [6] In this paper we propose a novel method of mask registration correction, which can be applied before mask writing based on mask exposure map, considering the factors of mask chip layout, writing sequence, and pattern density distribution. Our experiment data show if pattern density on the mask keeps at a low level, in-die mask registration residue error in 3sigma could be always under 5nm whatever blank type and related writer POSCOR (position correction) file was applied; it proves random error induced by material or equipment would occupy relatively fixed error budget as an error source of mask registration. On the real production, comparing the mask registration difference through critical production layers, it could be revealed that registration residue error of line space layers with higher pattern density is always much larger than the one of contact hole layers with lower pattern density. Additionally, the mask registration difference between layers with similar pattern density could also achieve under 5nm performance. We assume mask registration excluding random error is mostly induced by charge accumulation during mask writing, which may be calculated from surrounding exposed pattern density. Multi-loading test mask registration result shows that with x direction writing sequence, mask registration behavior in x direction is mainly related to sequence direction, but mask registration in y direction would be highly impacted by pattern density distribution map. It proves part of mask registration error is due to charge issue from nearby environment. If exposure sequence is chip by chip for normal multi chip layout case, mask registration of both x and y direction would be impacted analogously, which has also been proved by real data. Therefore, we try to set up a simple model to predict the mask registration error based on mask exposure map, and correct it with the given POSCOR (position correction) file for advanced mask writing if needed.

Optimization of robotic welding procedures for maintenance repair of hydraulic turbines

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lamarche, L.; Galopin, M.; Simoneau, R.

1996-12-31

A six axes super-compact robot is used for field repair of cavitation damages found on the discharge ring of hydraulic turbines. Optimization of overlay welding procedures to minimize surface distortion and reduce tearing forces on anchors in concrete, were studied through experimentation and FEM modelling. Planned experimentation has been used to develop optimum pulsed GMAW schedules of stainless steel overlays in 2G position. Best welding sequence was resolved through over lay welding of free plates. Each overlay consisted in one or two layers which were welded in the longitudinal and/or transverse direction of the rectangular plate. A bidirectional welding mode,more » a longitudinal layer followed by a transverse layer position and no cooling between the two layers, were found to be most effective in reducing distortion. The optimized 2G welding procedure was applied to a simulated field repair. Plate was anchored on a massive iron bracket with a set of instrumented bolts, to understand how normal tearing forces in anchors evolve. Preliminary results on FEM modelling of lateral force on anchors indicate good correlation with experiments, for an elementary design.« less

Overcoming low-alignment signal contrast induced alignment failure by alignment signal enhancement

NASA Astrophysics Data System (ADS)

Lee, Byeong Soo; Kim, Young Ha; Hwang, Hyunwoo; Lee, Jeongjin; Kong, Jeong Heung; Kang, Young Seog; Paarhuis, Bart; Kok, Haico; de Graaf, Roelof; Weichselbaum, Stefan; Droste, Richard; Mason, Christopher; Aarts, Igor; de Boeij, Wim P.

2016-03-01

Overlay is one of the key factors which enables optical lithography extension to 1X node DRAM manufacturing. It is natural that accurate wafer alignment is a prerequisite for good device overlay. However, alignment failures or misalignments are commonly observed in a fab. There are many factors which could induce alignment problems. Low alignment signal contrast is one of the main issues. Alignment signal contrast can be degraded by opaque stack materials or by alignment mark degradation due to processes like CMP. This issue can be compounded by mark sub-segmentation from design rules in combination with double or quadruple spacer process. Alignment signal contrast can be improved by applying new material or process optimization, which sometimes lead to the addition of another process-step with higher costs. If we can amplify the signal components containing the position information and reduce other unwanted signal and background contributions then we can improve alignment performance without process change. In this paper we use ASML's new alignment sensor (as was introduced and released on the NXT:1980Di) and sample wafers with special stacks which can induce poor alignment signal to demonstrate alignment and overlay improvement.

Factors affecting maintenance overlay ride quality : 1996 rideability status.

DOT National Transportation Integrated Search

1997-01-01

In early 1996, the Virginia Transportation Research Council initiated a formal analysis of the factors affecting overlay ride quality. As part of that effort, a statewide, multi-year survey of the ride quality for both new overlays and pavement await...

Tack coat optimization for HMA overlays : accelerated pavement test report.

DOT National Transportation Integrated Search

2009-02-01

Interface bonding between hot-mix asphalt (HMA) overlays and Portland cement concrete (PCC) pavements is one : of the most significant factors affecting overlay service life. This study was performed to quantify the effects of HMA type, : tack coat t...

Latex-modified fiber-reinforced concrete bridge deck overlay : construction/interim report.

DOT National Transportation Integrated Search

1993-06-01

Latex-modified concrete (LMC) is Portland cement concrete (PCC) with an admixture of latex. LMC is considered to be nearly impermeable to chlorides and is extensively used to construct bridge deck overlays. Unfortunately, some of these overlays have ...

Microsilica modified concrete for bridge deck overlays : second-year interim report.

DOT National Transportation Integrated Search

1994-10-01

This report summarizes the performance of microsilica concrete (MC) overlays on seven distressed portland cement concrete bridge decks at three sites in Oregon. This report emphasizes the overlays' condition after two, or in some cases, three years o...

Surface recycling Route US 71 : construction and initial evaluation.

DOT National Transportation Integrated Search

1986-08-01

Recently in Louisiana due to monetary constraints, typical overlay section design has been modified from a levelling and wearing course (3.5 inches) to cold milling (average 2 inch depth) and 1.5-2.0 inches of wearing course. Due to the five years of...

Laser-induced ferroelectric domain engineering in LiNbO3 crystals using an amorphous silicon overlayer

NASA Astrophysics Data System (ADS)

Zisis, G.; Martinez-Jimenez, G.; Franz, Y.; Healy, N.; Masaud, T. M.; Chong, H. M. H.; Soergel, E.; Peacock, A. C.; Mailis, S.

2017-08-01

We report laser-induced poling inhibition and direct poling in lithium niobate crystals (LiNbO3), covered with an amorphous silicon (a-Si) light-absorbing layer, using a visible (488 nm) continuous wave laser source. Our results show that the use of the a-Si overlayer produces deeper poling inhibited domains with minimum surface damage, as compared to previously reported UV laser writing experiments on uncoated crystals, thus increasing the applicability of this method in the production of ferroelectric domain engineered structures for nonlinear optical applications. The characteristics of the poling inhibited domains were investigated using differential etching and piezoresponse force microscopy.

Assessment and prediction of drying shrinkage cracking in bonded mortar overlays

DOE Office of Scientific and Technical Information (OSTI.GOV)

Beushausen, Hans, E-mail: hans.beushausen@uct.ac.za; Chilwesa, Masuzyo

2013-11-15

Restrained drying shrinkage cracking was investigated on composite beams consisting of substrate concrete and bonded mortar overlays, and compared to the performance of the same mortars when subjected to the ring test. Stress development and cracking in the composite specimens were analytically modeled and predicted based on the measurement of relevant time-dependent material properties such as drying shrinkage, elastic modulus, tensile relaxation and tensile strength. Overlay cracking in the composite beams could be very well predicted with the analytical model. The ring test provided a useful qualitative comparison of the cracking performance of the mortars. The duration of curing wasmore » found to only have a minor influence on crack development. This was ascribed to the fact that prolonged curing has a beneficial effect on tensile strength at the onset of stress development, but is in the same time not beneficial to the values of tensile relaxation and elastic modulus. -- Highlights: •Parameter study on material characteristics influencing overlay cracking. •Analytical model gives good quantitative indication of overlay cracking. •Ring test presents good qualitative indication of overlay cracking. •Curing duration has little effect on overlay cracking.« less

Human-Robot Interaction Directed Research Project

NASA Technical Reports Server (NTRS)

Rochlis, Jennifer; Ezer, Neta; Sandor, Aniko

2011-01-01

Human-robot interaction (HRI) is about understanding and shaping the interactions between humans and robots (Goodrich & Schultz, 2007). It is important to evaluate how the design of interfaces and command modalities affect the human s ability to perform tasks accurately, efficiently, and effectively (Crandall, Goodrich, Olsen Jr., & Nielsen, 2005) It is also critical to evaluate the effects of human-robot interfaces and command modalities on operator mental workload (Sheridan, 1992) and situation awareness (Endsley, Bolt , & Jones, 2003). By understanding the effects of interface design on human performance, workload, and situation awareness, interfaces can be developed that support the human in performing tasks with minimal errors and with appropriate interaction time and effort. Thus, the results of research on human-robot interfaces have direct implications for design. Because the factors associated with interfaces and command modalities in HRI are too numerous to address in 3 years of research, the proposed research concentrates on three manageable areas applicable to National Aeronautics and Space Administration (NASA) robot systems. These topic areas emerged from the Fiscal Year (FY) 2011 work that included extensive literature reviews and observations of NASA systems. The three topic areas are: 1) video overlays, 2) camera views, and 3) command modalities. Each area is described in detail below, along with relevance to existing NASA human-robot systems. In addition to studies in these three topic areas, a workshop is proposed for FY12. The workshop will bring together experts in human-robot interaction and robotics to discuss the state of the practice as applicable to research in space robotics. Studies proposed in the area of video overlays consider two factors in the implementation of augmented reality (AR) for operator displays during teleoperation. The first of these factors is the type of navigational guidance provided by AR symbology. In the proposed studies, participants performance during teleoperation of a robot arm will be compared when they are provided with command-guidance symbology (that is, directing the operator what commands to make) or situation-guidance symbology (that is, providing natural cues so that the operator can infer what commands to make). The second factor for AR symbology is the effects of overlays that are either superimposed or integrated into the external view of the world. A study is proposed in which the effects of superimposed and integrated overlays on operator task performance during teleoperated driving tasks are compared

Asphaltic mixture compaction and density validation : research brief.

DOT National Transportation Integrated Search

2017-02-01

Research Objectives: : Evaluate HMA longitudinal joint type, method and compaction data to produce specification recommendations to ensure the highest density at longitudinal joints : Evaluate thin lift overlay HMA and provide recommendations...

Polymer concrete bridge deck overlays : Deschutes River Bridge (Biggs) and Maupin Bridge (Maupin) : final report.

DOT National Transportation Integrated Search

1995-07-01

This report documents the construction and performance of two thin polymer concrete (with polyester/styrene resins) bridge deck overlays. The overlays were constructed in Biggs and Maupin, Oregon in June 1993. : Several problems were encountered duri...

Microsilica modified concrete for bridge deck overlays : construction report.

DOT National Transportation Integrated Search

1990-10-01

The study objective was to see if microsilica concrete (MC) is a viable alternative to the latex modified concrete (LMC) usually used on bridge deck overlays in Oregon. The study addresses MC overlays placed in 1989 on Portland cement concrete (PCC) ...

Wafer edge overlay control solution for N7 and beyond

NASA Astrophysics Data System (ADS)

van Haren, Richard; Calado, Victor; van Dijk, Leon; Hermans, Jan; Kumar, Kaushik; Yamashita, Fumiko

2018-03-01

Historically, the on-product overlay performance close to the wafer edge is lagging with respect to the inner part of the wafer. The reason for this is that wafer processing is less controlled close to the wafer edge as opposed to the rest of the wafer. It is generally accepted that Chemical Vapor Deposition (CVD) of stressed layers that cause wafer warp, wafer table contamination, Chemical Mechanical Polishing (CMP), and Reactive Ion Etch (RIE) may deteriorate the overlay performance and/or registration close to the wafer edge. For the N7 technology node and beyond, it is anticipated that the tight on-product overlay specification is required across the full wafer which includes the edge region. In this work, we highlight one contributor that may negatively impact the on-product overlay performance, namely the etch step. The focus will be mainly on the wafer edge region but the remaining part of the wafer is considered as well. Three use-cases are examined: multiple Litho-Etch steps (LEn), contact hole layer etch, and the copper dual damascene etch. We characterize the etch contribution by considering the overlay measurement after resist development inspect (ADI) and after etch inspect (AEI). We show that the Yieldstar diffraction based overlay (μDBO) measurements can be utilized to characterize the etch contribution to the overlay budget. The effects of target asymmetry as well as overlay shifts are considered and compared with SEM measurements. Based on the results above, we propose a control solution aiming to reduce or even eliminate the delta between ADI and AEI. By doing so, target/mark to device offsets due to etch might be avoided.

Improving concrete overlay construction : executive summary.

DOT National Transportation Integrated Search

2010-06-01

As the US highway system ages and available funding diminishes, transportation agencies : are looking for effective methods for preserving and extending the life of existing : pavements. These agencies are also being encouraged to minimize constructi...

Quantification of Organic richness through wireline logs: a case study of Roseneath shale formation, Cooper basin, Australia

NASA Astrophysics Data System (ADS)

Ahmad, Maqsood; Iqbal, Omer; Kadir, Askury Abd

2017-10-01

The late Carboniferous-Middle Triassic, intracratonic Cooper basin in northeastern South Australia and southwestern Queensland is Australia's foremost onshore hydrocarbon producing region. The basin compromises Permian carbonaceous shale like lacustrine Roseneath and Murteree shale formation which is acting as source and reservoir rock. The source rock can be distinguished from non-source intervals by lower density, higher transit time, higher gamma ray values, higher porosity and resistivity with increasing organic content. In current dissertation we have attempted to compare the different empirical approaches based on density relation and Δ LogR method through three overlays of sonic/resistivity, neutron/resistivity and density/resistivity to quantify Total organic content (TOC) of Permian lacustrine Roseneath shale formation using open hole wireline log data (DEN, GR, CNL, LLD) of Encounter 1 well. The TOC calculated from fourteen density relations at depth interval between 3174.5-3369 meters is averaged 0.56% while TOC from sonic/resistivity, neutron/resistivity and density/resistivity yielded an average value of 3.84%, 3.68%, 4.40%. The TOC from average of three overlay method is yielded to 3.98%. According to geochemical report in PIRSA the Roseneath shale formation has TOC from 1 - 5 wt %.There is unpromising correlations observed for calculated TOC from fourteen density relations and measured TOC on samples. The TOC from average value of three overlays using Δ LogR method showed good correlation with measured TOC on samples.

Latex modified Portland cement overlays : an analysis of samples removed from a bridge deck.

DOT National Transportation Integrated Search

1975-01-01

This report describes an evaluation of the latex modified mortar overlay the Route 85 (NBL) bridge over the Roanoke River. While the performance of the overlay has been generally satisfactory, corings and chloride analyses indicate the possibility of...

Effects of concrete moisture on polymer overlay bond over new concrete.

DOT National Transportation Integrated Search

2015-06-01

Epoxy polymer overlays have been used for decades on existing bridge decks to protect the deck and extend its : service life. The polymer overlays ability to seal a bridge deck is now being specified for new construction. Questions exist : about t...

Microsilica modified concrete for bridge deck overlays : first-year interim report.

DOT National Transportation Integrated Search

1991-11-01

The study objective was to see if microsilica concrete (MC) is a viable alternative to the latex modified concrete (LMC) usually used on bridge deck overlays in Oregon. The study addresses MC overlays placed in 1989 on 7 portland cement concrete (PCC...

Effectiveness of polymer bridge deck overlays in highway noise reduction : technical paper.

DOT National Transportation Integrated Search

2016-04-01

The Kansas Department of Transportation (KDOT) began placing multi-layer polymer bridge deck overlays in 1999 and at the present time have over 200 in service. A few years after placing the overlays, individuals indicated that they noticed how quiet ...

Evaluation of hydraulic cement concrete overlays placed on three pavements in Virginia.

DOT National Transportation Integrated Search

2000-08-01

Three hydraulic cement concrete pavement overlays were placed in the summer of 1995 at three locations in Virginia. Two of the overlays were placed on continuously reinforced concrete pavement to prevent spalling caused by a shy cover over the reinfo...

Mitigating Joint Reflective Cracks using Stone Interlayers : Case Study on Louisiana Highway 5, Desoto Parish : Research Project Capsule

DOT National Transportation Integrated Search

2017-12-01

When Portland cement concrete (PCC) pavement reaches an intolerable level of service, it is commonly overlaid with asphaltic concrete (AC) and is referred to as a composite pavement. Even though AC overlays are designed to resist failure mechanisms s...

Simple Magnetic Device Indicates Thickness Of Alloy 903

NASA Technical Reports Server (NTRS)

Long, Pin Jeng; Rodriguez, Sergio; Bright, Mark L.

1995-01-01

Handheld device called "ferrite indicator" orginally designed for use in determining ferrite content of specimen of steel. Placed in contact with specimen and functions by indicating whether magnet attracted more strongly to specimen or to calibrated reference sample. Relative strength of attraction shows whether alloy overlay thinner than allowable.

Effects of concrete moisture on polymer overlay bond over new concrete : [technical summary].

DOT National Transportation Integrated Search

2015-06-01

Epoxy polymer overlays have been used for decades on existing bridge decks to protect : the deck and extend its service life. The polymer overlays ability to seal a bridge deck : is now being specified for new construction. Questions exist about t...

Latex modified asphalt and experimental joint treatments on asphaltic concrete overlays : experimental project No. 3 : asphalt additives.

DOT National Transportation Integrated Search

1988-06-01

This report documents the construction and initial evaluation of several experimental features which were incorporated as part of an overlay of an existing PCC pavement in order to determine the feasibility of extending overlay service life. The expe...

The use of fiber reinforcement in latex modified concrete overlay : final report.

DOT National Transportation Integrated Search

2016-12-01

The requirement to quickly reopen highways in North Carolina has motivated the increased use of rapid-setting concrete in overlays. The addition of polymer latex to the material has been used to increase the service life of the overlays. The latex mo...

Three year evaluation of I-40 crack and seat experimental project

DOT National Transportation Integrated Search

1989-10-01

In 1986, Project I-40-3(31) was rehabilitated using crack and seat techniques and overlaying with a 4-inch HMAC overlay. The crack and seat technique was utilized to prevent reflection cracking in the HMAC overlay caused by joints in the existing JPC...

A field investigation of concrete overlays containing latex, silica fume, or Pyrament cement.

DOT National Transportation Integrated Search

1996-01-01

This study evaluated latex-modified concretes (LMC) and concretes containing silica fume (SFC) or Pyrament-blended cement (PBCC) in bridge deck overlays in the field. The condition of the overlays was monitored for 4 years. LMC and SFC were placed in...

Performance of thin bonded epoxy overlays on asphalt and concrete bridge deck surfaces.

DOT National Transportation Integrated Search

2014-06-01

This study is the evaluation of two thin bonded epoxy overlays: SafeLane (marketed by Cargill), and Flexogrid : (developed by PolyCarb). SafeLane is advertised as an anti-skid/anti-icing overlay that stores deicing chemicals for : release during wint...

Design and analysis of a silicon-based antiresonant reflecting optical waveguide chemical sensor

NASA Astrophysics Data System (ADS)

Remley, Kate A.; Weisshaar, Andreas

1996-08-01

The design of a silicon-based antiresonant reflecting optical waveguide (ARROW) chemical sensor is presented, and its theoretical performance is compared with that of a conventional structure. The use of an ARROW structure permits incorporation of a thick guiding region for efficient coupling to a single-mode fiber. A high-index overlay is added to fine tune the sensitivity of the ARROW chemical sensor. The sensitivity of the sensor is presented, and design trade-offs are discussed.

The Effect of Culture Methods and Serum Supplementation on Developmental Competence of Bovine Embryos Cultured In Vitro

USDA-ARS?s Scientific Manuscript database

The objective of this study was to compare the developmental competence of bovine in vitro fertilized embryos in three different culture methods; microdrop method (50 µl of medium under mineral oil in petri dishes) compared to tube methods (1 ml of medium in tubes) with or without oil overlay, and t...

Cost-effectiveness and performance of overlay systems in Illinois, volume 1 : effectiveness assessment of HMA overlay interlayer systems used to retard reflective cracking.

DOT National Transportation Integrated Search

2009-05-01

This project evaluated the ability of interlayer systems used in HMA overlays to retard reflective cracking. Field : crack surveys and forensic investigation, including video imaging and ground penetrating radar surveys as well : as laboratory testin...

Cost-effectiveness and performance of overlay systems in Illinois, volume 2 : guidelines for interlayer system selection decision when used in HMA overlays.

DOT National Transportation Integrated Search

2009-05-01

In an effort to control reflective cracking in hot-mix asphalt (HMA) overlays placed over Portland Cement : Concrete (PCC) pavements, several reflective crack control (RCC) systems, including interlayer systems, : have been used. However, the cost-ef...

Evaluation of the installation and initial condition of hydraulic cement concrete overlays placed on three pavements in Virginia.

DOT National Transportation Integrated Search

1999-04-01

Hydraulic cement concrete pavement overlays were placed in the summer of 1995 at the following locations in Virginia: : 1-295 near Richmond : 1-85 near Petersburg : Rt. 29 near Charlottesville. : Overlays were placed on 1-295 SBL (near mi...

Evaluation of the construction and performance of polymer concrete overlays on five bridges : interim report no. 1.

DOT National Transportation Integrated Search

1983-01-01

The installation of thin polymer concrete overlays on five bridges on I-85 near Williamsburg, Virginia, has demonstrated that an overlay of low permeability and high skid resistance can be successfully installed by a contractor with a minimum of disr...

Improved control of multi-layer overlay in advanced 8nm logic nodes

NASA Astrophysics Data System (ADS)

Kim, Tae-Sun; Park, Young-Sik; Kim, Yong-Chul; Kim, Byoung-Hoon; Lee, Ji-Hun; Kwak, Min-Keun; Choi, Sung-Won; Park, Joon-Soo; Yang, Hong-Cheon; Meixner, Philipp; Lee, Dong-jin; Kwon, Oh-Sung; Kim, Hyun-Su; Park, Jin-Tae; Lee, Sung-Min; Grouwstra, Cedric; van der Meijden, Vidar; El Kodadi, Mohamed; Kim, Chris; Guittet, Pierre-Yves; Nooitgedagt, Tjitte

2018-03-01

With the increase of litho-etch steps the industry requires metrology to deliver solutions to improve throughput of overlay measurements without impacting accuracy. ASML's YieldStar 350E is capable of utilizing targets, which can measure the overlay of multiple layers simultaneously. For the work discussed in this paper, an evaluation is performed on Logic product wafers using both single-layer and multi-layer (MLT) quad type targets (able to capture up to four litho-etch steps). Different target types were compared in terms of Move-and-Acquire (MA) time, residual and matching to SEM. Using the MLT targets, an MA time improvement of 56% was demonstrated on the singlelayer. The maximum delta between the overlay residual among the YieldStar targets after applying an high order model was shown to be 0.05 nm. In comparison to after-etch overlay, the correlation of the MLT target was determined with an R2 > 0.95 using a set-get wafer with induced 10 nm overlay range. On a normal production wafer, the correlation was R2 > 0.67, which is high on a wafer without induced overlay. The comparison of modeling parameters between SEM and MLT targets shows a good match (< 0.16nm) as well.

Investigation of aged hot-mix asphalt pavements.

DOT National Transportation Integrated Search

2013-09-01

Over the lifetime of an asphalt concrete (AC) pavement, the roadway requires periodic resurfacing and rehabilitation to provide : acceptable performance. The most popular resurfacing method is an asphalt overlay over the existing roadway. In the desi...

Water Damage to Asphalt Overlays: Case Histories

DOT National Transportation Integrated Search

1989-02-01

Numerous papers have been published on the phenomenon of stripping, especially on the possible causes of stripping, methods for predicting stripping potential of asphalt paving mixtures, and use of additives to minimize or prevent stripping. However,...

Reduced-size spiral antenna design using dielectric overlay loading for use in ground penetrating radar and design of alternative antennas using Vivaldi radiators

NASA Astrophysics Data System (ADS)

Paolino, Donald D.; Neel, Michael M.; Franck, Charmaine C.

2002-08-01

Spiral antennas are one of the common radiators used in ground penetrating radar (GPR). Mine detection is generally performed in a frequency band of interest between 500 MHz to 4 GHz. This paper discusses technical recommendations and R&D performed by Naval Air Warfare Center (NAWC), China Lake, CA , resulting in our best effort spiral design emphasizing highest low band gain while maintaining overall axial ratio purity. This design consisted of a spiral printed on a high dielectric substrate that allowed the antenna to be used at lower frequencies then conventional plastic substrate based two arm spirals of the same diameter. A graded dielectric overlay scheme was employed to facilitate matching to free space on one side, and absorber lined cavity on the other. Test data is given in terms of match and free space patterns using spin linear sources to obtain antenna axial ratios. The low-end gain was improved from -17 dBi to -5 dBi. Two Vivaldi slot antennas (star junction fed and an antipodal construction) are discussed as alternative antennas offering broadband high gain and economical construction. Both designs produced good patterns with a +5 dBi average gain over the band. Patterns for the log spiral and Archimedean spiral, together with recommendations for future improvements are provided.

Tunable in-line fiber optic comb filter using a side-polished single-mode fiber coupler with LiNbO 3 overlay and intermediate coupling layer

NASA Astrophysics Data System (ADS)

Sohn, Kyung-Rak; Song, Jae-Won

2002-03-01

Using a side-polished single-mode fiber covered with a polished LiNbO 3 overlay and an intermediate coupling layer, tunable fiber-optic comb filters are demonstrated. The device behaviors based on the modal properties of the fiber and the planar LiNbO 3 waveguide are analyzed by two dimensional beam propagation methods (2-D BPM) and discussed the role of an intermediate coupling layer in terms of coupling efficiency. We also show that the thermo-optic effects of this layer can be utilized to tune the comb filter. When the polished x-cut LiNbO 3 with 200 μm thickness is used as a multimode overlay waveguide, the comb output spectra with free spectral range of 4 nm are measured in 1550 nm wavelength range. The tuning rate as a function of the refractive index of an intermediate coupling layer, Δλ/ Δnb, is about -0.129 nm/-0.001. The experimental results are in good agreement with the calculated results.

Comparative analysis of tumor spheroid generation techniques for differential in vitro drug toxicity

PubMed Central

Raghavan, Shreya; Rowley, Katelyn R.; Mehta, Geeta

2016-01-01

Multicellular tumor spheroids are powerful in vitro models to perform preclinical chemosensitivity assays. We compare different methodologies to generate tumor spheroids in terms of resultant spheroid morphology, cellular arrangement and chemosensitivity. We used two cancer cell lines (MCF7 and OVCAR8) to generate spheroids using i) hanging drop array plates; ii) liquid overlay on ultra-low attachment plates; iii) liquid overlay on ultra-low attachment plates with rotating mixing (nutator plates). Analysis of spheroid morphometry indicated that cellular compaction was increased in spheroids generated on nutator and hanging drop array plates. Collagen staining also indicated higher compaction and remodeling in tumor spheroids on nutator and hanging drop arrays compared to conventional liquid overlay. Consequently, spheroids generated on nutator or hanging drop plates had increased chemoresistance to cisplatin treatment (20-60% viability) compared to spheroids on ultra low attachment plates (10-20% viability). Lastly, we used a mathematical model to demonstrate minimal changes in oxygen and cisplatin diffusion within experimentally generated spheroids. Our results demonstrate that in vitro methods of tumor spheroid generation result in varied cellular arrangement and chemosensitivity. PMID:26918944

Direct Mask Overlay Inspection

NASA Astrophysics Data System (ADS)

Hsia, Liang-Choo; Su, Lo-Soun

1983-11-01

In this paper, we present a mask inspection methodology and procedure that involves direct X-Y measurements. A group of dice is selected for overlay measurement; four measurement targets were laid out in the kerf of each die. The measured coordinates are then fit-ted to either a "historical" grid, which reflects the individual tool bias, or to an ideal grid squares fashion. Measurements are done using a Nikon X-Y laser interferometric measurement system, which provides a reference grid. The stability of the measurement system is essential. We then apply appropriate statistics to the residual after the fit to determine the overlay performance. Statistical methods play an important role in the product disposition. The acceptance criterion is, however, a compromise between the cost for mask making and the final device yield. In order to satisfy the demand on mask houses for quality of masks and high volume, mixing lithographic tools in mask making has become more popular, in particular, mixing optical and E-beam tools. In this paper, we also discuss the inspection procedure for mixing different lithographic tools.

Bermuda Triangle: a subsystem of the 168/E interfacing scheme used by Group B at SLAC

DOE Office of Scientific and Technical Information (OSTI.GOV)

Oxoby, G.J.; Levinson, L.J.; Trang, Q.H.

1979-12-01

The Bermuda Triangle system is a method of interfacing several 168/E microprocessors to a central system for control of the processors and overlaying their memories. The system is a three-way interface with I/O ports to a large buffer memory, a PDP11 Unibus and a bus to the 168/E processors. Data may be transferred bidirectionally between any two ports. Two Bermuda Triangles are used, one for the program memory and one for the data memory. The program buffer memory stores the overlay programs for the 168/E, and the data buffer memory, the incoming raw data, the data portion of the overlays,more » and the outgoing processed events. This buffering is necessary since the memories of 168/E microprocessors are small compared to the main program and the amount of data being processed. The link to the computer facility is via a Unibus to IBM channel interface. A PDP11/04 controls the data flow. 7 figures, 4 tables. (RWR)« less

Synthesizing 3D Surfaces from Parameterized Strip Charts

NASA Technical Reports Server (NTRS)

Robinson, Peter I.; Gomez, Julian; Morehouse, Michael; Gawdiak, Yuri

2004-01-01

We believe 3D information visualization has the power to unlock new levels of productivity in the monitoring and control of complex processes. Our goal is to provide visual methods to allow for rapid human insight into systems consisting of thousands to millions of parameters. We explore this hypothesis in two complex domains: NASA program management and NASA International Space Station (ISS) spacecraft computer operations. We seek to extend a common form of visualization called the strip chart from 2D to 3D. A strip chart can display the time series progression of a parameter and allows for trends and events to be identified. Strip charts can be overlayed when multiple parameters need to visualized in order to correlate their events. When many parameters are involved, the direct overlaying of strip charts can become confusing and may not fully utilize the graphing area to convey the relationships between the parameters. We provide a solution to this problem by generating 3D surfaces from parameterized strip charts. The 3D surface utilizes significantly more screen area to illustrate the differences in the parameters and the overlayed strip charts, and it can rapidly be scanned by humans to gain insight. The selection of the third dimension must be a parallel or parameterized homogenous resource in the target domain, defined using a finite, ordered, enumerated type, and not a heterogeneous type. We demonstrate our concepts with examples from the NASA program management domain (assessing the state of many plans) and the computers of the ISS (assessing the state of many computers). We identify 2D strip charts in each domain and show how to construct the corresponding 3D surfaces. The user can navigate the surface, zooming in on regions of interest, setting a mark and drilling down to source documents from which the data points have been derived. We close by discussing design issues, related work, and implementation challenges.

Model-based correction for local stress-induced overlay errors

NASA Astrophysics Data System (ADS)

Stobert, Ian; Krishnamurthy, Subramanian; Shi, Hongbo; Stiffler, Scott

2018-03-01

Manufacturing embedded DRAM deep trench capacitors can involve etching very deep holes into silicon wafers1. Due to various design constraints, these holes may not be uniformly distributed across the wafer surface. Some wafer processing steps for these trenches results in stress effects which can distort the silicon wafer in a manner that creates localized alignment issues between the trenches and the structures built above them on the wafer. In this paper, we describe a method to model these localized silicon distortions for complex layouts involving billions of deep trench structures. We describe wafer metrology techniques and data which have been used to verify the stress distortion model accuracy. We also provide a description of how this kind of model can be used to manipulate the polygons in the mask tape out flow to compensate for predicted localized misalignments between design shapes from a deep trench mask and subsequent masks.

The Molecular Volcano Revisited: Determination of Crack Propagation and Distribution During the Crystallization of Nanoscale Amorphous Solid Water Films.

DOE Office of Scientific and Technical Information (OSTI.GOV)

May, Robert A.; Smith, R. Scott; Kay, Bruce D.

2012-02-02

Temperature programmed desorption (TPD) is utilized to determine the length distribution of cracks formed through amorphous solid water (ASW) during crystallization. This distribution is determined by monitoring how the thickness of an ASW overlayer alters desorption of an underlayer of O2. As deposited the ASW overlayer prevents desorption of O2. During crystallization, cracks form through the ASW overlayer and open a path to vacuum which allows O2 to escape in a rapid episodic release known as the 'molecular volcano'. Sufficiently thick ASW overlayers further trap O2 resulting in a second O2 desorption peak commensurate with desorption of the last ofmore » the ASW overlayer. The evolution of this trapping peak with overlayer thickness is the basis for determining the distribution of crystallization induced cracks through the ASW. Reflection adsorption infrared spectroscopy (RAIRS) and TPD of multicomponent parfait structures of ASW, O2 and Kr indicate that a preponderance of these cracks propagate down from the outer surface of the ASW.« less

On the integral use of foundational concepts in verifying validity during skull-photo superimposition.

PubMed

Jayaprakash, Paul T

2017-09-01

Often cited reliability test on video superimposition method integrated scaling face-images in relation to skull-images, tragus-auditory meatus relationship in addition to exocanthion-Whitnall's tubercle relationship when orientating the skull-image and wipe mode imaging in addition to mix mode imaging when obtaining skull-face image overlay and evaluating the goodness of match. However, a report that found higher false positive matches in computer assisted superimposition method transited from the above foundational concepts and relied on images of unspecified sizes that are lesser than 'life-size', frontal plane landmarks in the skull- and face- images alone for orientating the skull-image and mix images alone for evaluating the goodness of match. Recently, arguing the use of 'life-size' images as 'archaic', the authors who tested the reliability in the computer assisted superimposition method have denied any method transition. This article describes that the use of images of unspecified sizes at lesser than 'life-size' eliminates the only possibility to quantify parameters during superimposition which alone enables dynamic skull orientation when overlaying a skull-image with a face-image in an anatomically acceptable orientation. The dynamic skull orientation process mandatorily requires aligning the tragus in the 2D face-image with the auditory meatus in the 3D skull-image for anatomically orientating the skull-image in relation to the posture in the face-image, a step not mentioned by the authors describing the computer assisted superimposition method. Furthermore, mere reliance on mix type images during image overlay eliminates the possibility to assess the relationship between the leading edges of the skull- and face-image outlines as also specific area match among the corresponding craniofacial organs during superimposition. Indicating the possibility of increased false positive matches as a consequence of the above method transitions, the need for testing the reliability in the superimposition method adopting concepts that are considered safe is stressed. Copyright © 2017 Elsevier B.V. All rights reserved.

Evaluation of Some Finishing Properties of Oil Palm Particleboard for Furniture Application

NASA Astrophysics Data System (ADS)

Ratnasingam, J.; Nyugen, V.; Ioras, F.

The finishing properties of particleboard made from the Empty-Fruit Bunch (EFB) of oil palm (Elaeis guineensis Jacq.) were evaluated for its suitability for furniture applications, using different coating and overlay materials. The results found that the thick plastic-formica overlay provided the best surface finish, in terms of surface smoothness, adhesion strength and impact resistance. Although the polyurethane lacquer provided an acceptable finish, its quality and performance is not comparable to that of the thick plastic overlay. Despite the fact that the use of such overlay material may render the material not aesthetically appealing and limit it to concealed applications or where the thick overlay material is tolerated, its cost competitiveness and environmental friendliness may be able to position the oil palm particleboard as a substitute for the conventional wood-based particleboard in the furniture manufacturing industry.

I-line stepper based overlay evaluation method for wafer bonding applications

NASA Astrophysics Data System (ADS)

Kulse, P.; Sasai, K.; Schulz, K.; Wietstruck, M.

2018-03-01

In the last decades the semiconductor technology has been driven by Moore's law leading to high performance CMOS technologies with feature sizes of less than 10 nm [1]. It has been pointed out that not only scaling but also the integration of novel components and technology modules into CMOS/BiCMOS technologies is becoming more attractive to realize smart and miniaturized systems [2]. Driven by new applications in the area of communication, health and automation, new components and technology modules such as BiCMOS embedded RF-MEMS, high-Q passives, Sibased microfluidics and InP-SiGe BiCMOS heterointegration have been demonstrated [3-6]. In contrast to standard VLSI processes fabricated on front side of the silicon wafer, these new technology modules additionally require to process the backside of the wafer; thus require an accurate alignment between the front and backside of the wafer. In previous work an advanced back to front side alignment technique and implementation into IHP's 0.25/0.13 µm high performance SiGe:C BiCMOS backside process module has been presented [7]. The developed technique enables a high resolution and accurate lithography on the backside of BiCMOS wafer for additional backside processing. In addition to the aforementioned back side process technologies, new applications like Through-Silicon Vias (TSV) for interposers and advanced substrate technologies for 3D heterogeneous integration demand not only single wafer fabrication but also processing of wafer stacks provided by temporary and permanent wafer bonding [8-9]. In this work, the non-contact infrared alignment system of the Nikon® i-line Stepper NSR-SF150 for both alignment and the overlay determination of bonded wafer stacks with embedded alignment marks are used to achieve an accurate alignment between the different wafer sides. The embedded field image alignment (FIA) marks of the interface and the device wafer top layer are measured in a single measurement job. By taking the offsets between all different FIA's into account, after correcting the wafer rotation induced FIA position errors, hence an overlay for the stacked wafers can be determined. The developed approach has been validated by a standard front side resist in resist experiment. After the successful validation of the developed technique, special wafer stacks with FIA alignment marks in the bonding interface are fabricated and exposed. Following overlay calculation shows an overlay of less than 200 nm, which enables very accurate process condition for highly scaled TSV integration and advanced substrate integration into IHP's 0.25/0.13 µm SiGe:C BiCMOS technology. The developed technique also allows using significantly smaller alignment marks (i.e. standard FIA alignment marks). Furthermore, the presented method is used, in case of wafer bow related overlay tool problems, for the overlay evaluation of the last two metal layers from production wafers prepared in IHP's standard 0.25/0.13 µm SiGe:C BiCMOS technology. In conclusion, the exposure and measurement job can be done with the same tool, minimizing the back to front side/interface top layer misalignment which leads to a significant device performance improvement of backside/TSV integrated components and technologies.

Prosthodontic management of worn dentition in pediatric patient with complete overlay dentures: a case report

PubMed Central

Rastogi, Jyoti; Jain, Chandni; Singh, Harkanwal Preet

2012-01-01

Overlay complete dentures are simple, reversible and economical treatment modality for patients with congenital or acquired disorders that severely affect the tooth development. It satisfies both the esthetic and functional demands where the extraction of teeth is not generally indicated. In pediatric patients, the overlay dentures establish a relatively stable occlusion that improves patient's tolerance to the future treatment procedures for worn dentition. This clinical report highlights the imperative need of appropriate treatment strategy and application of maxillary and mandibular overlay dentures in a pediatric patient who suffered from congenitally mutilated and worn dentition. PMID:23236577

Survival Rate of Resin and Ceramic Inlays, Onlays, and Overlays: A Systematic Review and Meta-analysis.

PubMed

Morimoto, S; Rebello de Sampaio, F B W; Braga, M M; Sesma, N; Özcan, M

2016-08-01

This systematic review and meta-analysis aimed to evaluate the survival rate of ceramic and resin inlays, onlays, and overlays and to identify the complication types associated with the main clinical outcomes. Two reviewers searched PubMed, EMBASE, and the Cochrane Central Register of Controlled Trials for articles published between 1983 through April 2015, conforming to Preferred Reporting Items for Systematic Reviews and Meta-Analyses guidelines for systematic reviews. Clinical studies meeting the following criteria were included: 1) studies related to resin and ceramic inlays, onlays, and overlays; 2) prospective, retrospective, or randomized controlled trials conducted in humans; 3) studies with a dropout rate of less than 30%; and 4) studies with a follow-up longer than 5 y. Of 1,389 articles, 14 met the inclusion criteria. The meta-regression indicated that the type of ceramic material (feldspathic porcelain vs. glass-ceramic), study design (retrospective vs. prospective), follow-up time (5 vs. 10 y), and study setting (university vs. private clinic) did not affect the survival rate. Estimated survival rates for glass-ceramics and feldspathic porcelain were between 92% and 95% at 5 y (n = 5,811 restorations) and were 91% at 10 y (n = 2,154 restorations). Failures were related to fractures/chipping (4%), followed by endodontic complications (3%), secondary caries (1%), debonding (1%), and severe marginal staining (0%). Odds ratios (95% confidence intervals) were 0.19 (0.04 to 0.96) and 0.54 (0.17 to 1.69) for pulp vitality and type of tooth involved (premolars vs. molars), respectively. Ceramic inlays, onlays, and overlays showed high survival rates at 5 y and 10 y, and fractures were the most frequent cause of failure. © International & American Associations for Dental Research 2016.

Considerations for Software Defined Networking (SDN): Approaches and use cases

NASA Astrophysics Data System (ADS)

Bakshi, K.

Software Defined Networking (SDN) is an evolutionary approach to network design and functionality based on the ability to programmatically modify the behavior of network devices. SDN uses user-customizable and configurable software that's independent of hardware to enable networked systems to expand data flow control. SDN is in large part about understanding and managing a network as a unified abstraction. It will make networks more flexible, dynamic, and cost-efficient, while greatly simplifying operational complexity. And this advanced solution provides several benefits including network and service customizability, configurability, improved operations, and increased performance. There are several approaches to SDN and its practical implementation. Among them, two have risen to prominence with differences in pedigree and implementation. This paper's main focus will be to define, review, and evaluate salient approaches and use cases of the OpenFlow and Virtual Network Overlay approaches to SDN. OpenFlow is a communication protocol that gives access to the forwarding plane of a network's switches and routers. The Virtual Network Overlay relies on a completely virtualized network infrastructure and services to abstract the underlying physical network, which allows the overlay to be mobile to other physical networks. This is an important requirement for cloud computing, where applications and associated network services are migrated to cloud service providers and remote data centers on the fly as resource demands dictate. The paper will discuss how and where SDN can be applied and implemented, including research and academia, virtual multitenant data center, and cloud computing applications. Specific attention will be given to the cloud computing use case, where automated provisioning and programmable overlay for scalable multi-tenancy is leveraged via the SDN approach.

Resource Kit Tips for Teaching Textiles and Clothing.

ERIC Educational Resources Information Center

New York State Education Dept., Albany. Bureau of Continuing Education Curriculum Development.

This kit has been designed to acquaint the instructor of adult textiles and clothing programs with some of the teaching aids that might be used to improve the learning process. The main parts of the publication include: Preparing and Using Transparencies; Developing a Learning Experience Using a Transparency; A Master Transparency with Overlays;…

78 FR 979 - Petition for Positive Train Control Safety Plan Approval and System Certification of the...

Federal Register 2010, 2011, 2012, 2013, 2014

2013-01-07

...] Petition for Positive Train Control Safety Plan Approval and System Certification of the Electronic Train... the Federal Railroad Administration (FRA) for Positive Train Control (PTC) Safety Plan (PTCSP...-based train control system safety overlay designed to protect against the consequences of train-to-train...

Geography via the Overhead Projector: Do It This Way, 7.

ERIC Educational Resources Information Center

Best, Thomas D.

This booklet is designed to assist teachers in their use of overhead projectors when teaching geography. With the overhead technique, relationships among patterns can be suggested bit by bit on inexpensive, easily prepared overlays that are projected to sizes appropriate for a particular instructional situation. A general discussion of the…

Visually assessed colour overlay features in shear-wave elastography for breast masses: quantification and diagnostic performance.

PubMed

Gweon, Hye Mi; Youk, Ji Hyun; Son, Eun Ju; Kim, Jeong-Ah

2013-03-01

To determine whether colour overlay features can be quantified by the standard deviation (SD) of the elasticity measured in shear-wave elastography (SWE) and to evaluate the diagnostic performance for breast masses. One hundred thirty-three breast lesions in 119 consecutive women who underwent SWE before US-guided core needle biopsy or surgical excision were analysed. SWE colour overlay features were assessed using two different colour overlay pattern classifications. Quantitative SD of the elasticity value was measured with the region of interest including the whole breast lesion. For the four-colour overlay pattern, the area under the ROC curve (Az) was 0.947; with a cutoff point between pattern 2 and 3, sensitivity and specificity were 94.4 % and 81.4 %. According to the homogeneity of the elasticity, the Az was 0.887; with a cutoff point between reasonably homogeneous and heterogeneous, sensitivity and specificity were 86.1 % and 82.5 %. For the SD of the elasticity, the Az was 0.944; with a cutoff point of 12.1, sensitivity and specificity were 88.9 % and 89.7 %. The colour overlay features showed significant correlations with the quantitative SD of the elasticity (P < 0.001). The colour overlay features and the SD of the elasticity in SWE showed excellent diagnostic performance and showed good correlations between them.

Key Management Schemes for Peer-to-Peer Multimedia Streaming Overlay Networks

NASA Astrophysics Data System (ADS)

Naranjo, J. A. M.; López-Ramos, J. A.; Casado, L. G.

Key distribution for multimedia live streaming peer-to-peer overlay networks is a field still in its childhood stage. A scheme designed for networks of this kind must seek security and efficiency while keeping in mind the following restrictions: limited bandwidth, continuous playing, great audience size and clients churn. This paper introduces two novel schemes that allow a trade-off between security and efficiency by allowing to dynamically vary the number of levels used in the key hierarchy. These changes are motivated by great variations in audience size, and initiated by decision of the Key Server. Additionally, a comparative study of both is presented, focusing on security and audience size. Results show that larger key hierarchies can supply bigger audiences, but offer less security against statistical attacks. The opposite happens for shorter key hierarchies.

Improving management performance of P2PSIP for mobile sensing in wireless overlays.

PubMed

Sendín-Raña, Pablo; González-Castaño, Francisco Javier; Gómez-Cuba, Felipe; Asorey-Cacheda, Rafael; Pousada-Carballo, José María

2013-11-08

Future wireless communications are heading towards an all-Internet Protocol (all-IP) design, and will rely on the Session Initiation Protocol (SIP) to manage services, such as voice over IP (VoIP). The centralized architecture of traditional SIP has numerous disadvantages for mobile ad hoc services that may be possibly overcome by advanced peer-to-peer (P2P) technologies initially developed for the Internet. In the context of mobile sensing, P2PSIP protocols facilitate decentralized and fast communications with sensor-enabled terminals. Nevertheless, in order to make P2PSIP protocols feasible in mobile sensing networks, it is necessary to minimize overhead transmissions for signaling purposes, which reduces the battery lifetime. In this paper, we present a solution to improve the management of wireless overlay networks by defining an adaptive algorithm for the calculation of refresh time. The main advantage of the proposed algorithm is that it takes into account new parameters, such as the delay between nodes, and provides satisfactory performance and reliability levels at a much lower management overhead than previous approaches. The proposed solution can be applied to many structured P2P overlays or P2PSIP protocols. We evaluate it with Kademlia-based distributed hash tables (DHT) and dSIP.

Improving Management Performance of P2PSIP for Mobile Sensing in Wireless Overlays

PubMed Central

Sendín-Raña, Pablo; González-Castaño, Francisco Javier; Gómez-Cuba, Felipe; Asorey-Cacheda, Rafael; Pousada-Carballo, José María

2013-01-01

Future wireless communications are heading towards an all-Internet Protocol (all-IP) design, and will rely on the Session Initiation Protocol (SIP) to manage services, such as voice over IP (VoIP). The centralized architecture of traditional SIP has numerous disadvantages for mobile ad hoc services that may be possibly overcome by advanced peer-to-peer (P2P) technologies initially developed for the Internet. In the context of mobile sensing, P2PSIP protocols facilitate decentralized and fast communications with sensor-enabled terminals. Nevertheless, in order to make P2PSIP protocols feasible in mobile sensing networks, it is necessary to minimize overhead transmissions for signaling purposes, which reduces the battery lifetime. In this paper, we present a solution to improve the management of wireless overlay networks by defining an adaptive algorithm for the calculation of refresh time. The main advantage of the proposed algorithm is that it takes into account new parameters, such as the delay between nodes, and provides satisfactory performance and reliability levels at a much lower management overhead than previous approaches. The proposed solution can be applied to many structured P2P overlays or P2PSIP protocols. We evaluate it with Kademlia-based distributed hash tables (DHT) and dSIP PMID:24217358

Omnidirectional color filters capitalizing on a nano-resonator of Ag-TiO2-Ag integrated with a phase compensating dielectric overlay

NASA Astrophysics Data System (ADS)

Park, Chul-Soon; Shrestha, Vivek Raj; Lee, Sang-Shin; Kim, Eun-Soo; Choi, Duk-Yong

2015-02-01

We present a highly efficient omnidirectional color filter that takes advantage of an Ag-TiO2-Ag nano-resonator integrated with a phase-compensating TiO2 overlay. The dielectric overlay substantially improves the angular sensitivity by appropriately compensating for the phase pertaining to the structure and suppresses unwanted optical reflection so as to elevate the transmission efficiency. The filter is thoroughly designed, and it is analyzed in terms of its reflection, optical admittance, and phase shift, thereby highlighting the origin of the omnidirectional resonance leading to angle-invariant characteristics. The polarization dependence of the filter is explored, specifically with respect to the incident angle, by performing experiments as well as by providing the relevant theoretical explanation. We could succeed in demonstrating the omnidirectional resonance for the incident angles ranging to up to 70°, over which the center wavelength is shifted by below 3.5% and the peak transmission efficiency is slightly degraded from 69%. The proposed filters incorporate a simple multi-layered structure and are expected to be utilized as tri-color pixels for applications that include image sensors and display devices. These devices are expected to allow good scalability, not requiring complex lithographic processes.

A MODELING APPROACH FOR ESTIMATING WATERSHED IMPERVIOUS SURFACE AREA FROM NATIONAL LAND COVER DATA 92

EPA Science Inventory

We used National Land Cover Data 92 (NLCD92), vector impervious surface data, and raster GIS overlay methods to derive impervious surface coefficients per NLCD92 class in portions of the Nfid-Atlantic physiographic region. The methods involve a vector to raster conversion of the ...

Questioning the Benefits That Coloured Overlays Can Have for Reading in Students with and without Dyslexia

ERIC Educational Resources Information Center

Henderson, Lisa M.; Tsogka, Natassa; Snowling, Margaret J.

2013-01-01

Visual stress (the experience of visual distortions and discomfort during prolonged reading) is frequently identified and alleviated with coloured overlays or lenses. Previous studies have associated visual stress with dyslexia and as a consequence, coloured overlays are widely distributed to children and adults with reading difficulty. However,…

49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

Code of Federal Regulations, 2013 CFR

2013-10-01

... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

Code of Federal Regulations, 2012 CFR

2012-10-01

... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

49 CFR 236.1015 - PTC Safety Plan content requirements and PTC System Certification.

Code of Federal Regulations, 2011 CFR

2011-10-01

... Administrator finds that the PTCSP and supporting documentation support a finding that the system complies with... additional requirements apply to: (1) Non-vital overlay. A PTC system proposed as an overlay on the existing... greater than the level of safety for the previous PTC systems. (2) Vital overlay. A PTC system proposed on...

Enhanced Performance of Field-Effect Transistors Based on Black Phosphorus Channels Reduced by Galvanic Corrosion of Al Overlayers.

PubMed

Lee, Sangik; Yoon, Chansoo; Lee, Ji Hye; Kim, Yeon Soo; Lee, Mi Jung; Kim, Wondong; Baik, Jaeyoon; Jia, Quanxi; Park, Bae Ho

2018-06-06

Two-dimensional (2D)-layered semiconducting materials with considerable band gaps are emerging as a new class of materials applicable to next-generation devices. Particularly, black phosphorus (BP) is considered to be very promising for next-generation 2D electrical and optical devices because of its high carrier mobility of 200-1000 cm 2 V -1 s -1 and large on/off ratio of 10 4 to 10 5 in field-effect transistors (FETs). However, its environmental instability in air requires fabrication processes in a glovebox filled with nitrogen or argon gas followed by encapsulation, passivation, and chemical functionalization of BP. Here, we report a new method for reduction of BP-channel devices fabricated without the use of a glovebox by galvanic corrosion of an Al overlayer. The reduction of BP induced by an anodic oxidation of Al overlayer is demonstrated through surface characterization of BP using atomic force microscopy, Raman spectroscopy, and X-ray photoemission spectroscopy along with electrical measurement of a BP-channel FET. After the deposition of an Al overlayer, the FET device shows a significantly enhanced performance, including restoration of ambipolar transport, high carrier mobility of 220 cm 2 V -1 s -1 , low subthreshold swing of 0.73 V/decade, and low interface trap density of 7.8 × 10 11 cm -2 eV -1 . These improvements are attributed to both the reduction of the BP channel and the formation of an Al 2 O 3 interfacial layer resulting in a high- k screening effect. Moreover, ambipolar behavior of our BP-channel FET device combined with charge-trap behavior can be utilized for implementing reconfigurable memory and neuromorphic computing applications. Our study offers a simple device fabrication process for BP-channel FETs with high performance using galvanic oxidation of Al overlayers.

Evaluation of Tizian overlays by means of a swept source optical coherence tomography system

NASA Astrophysics Data System (ADS)

Marcauteanu, Corina; Sinescu, Cosmin; Negrutiu, Meda Lavinia; Stoica, Eniko Tunde; Topala, Florin; Duma, Virgil Florin; Bradu, Adrian; Podoleanu, Adrian Gh.

2016-03-01

The teeth affected by pathologic attrition can be restored by a minimally invasive approach, using Tizian overlays. In this study we prove the advantages of a fast swept source (SS) OCT system in the evaluation of Tizian overlays placed in an environment characterized by high occlusal forces. 12 maxillary first premolars were extracted and prepared for overlays. The Tizian overlays were subjected to 3000 alternating cycles of thermo-cycling (from -10°C to +50°C) and to mechanical occlusal overloads (at 800 N). A fast SS OCT system was used to evaluate the Tizian overlays before and after the mechanical and thermal straining. The SS (Axsun Technologies, Billerica, MA) has a central wavelength of 1060 nm, sweeping range of 106 nm (quoted at 10 dB) and a 100 kHz line rate. The depth resolution of the system, measured experimentally in air was 10 μm. The imaging system used for this study offers high spatial resolutions in both directions, transversal and longitudinal of around 10 μm, a high sensitivity, and it is also able to acquire entire tridimensional (3D)/volume reconstructions as fast as 2.5 s. Once the full dataset was acquired, rendered high resolutions en-face projections could be produced. Using them, the overlay (i.e., cement) abutment tooth interfaces were remarked both on B-scans/two-dimensional (2D) sections and in the 3D reconstructions. Using the system several open interfaces were possible to detect. The fast SS OCT system thus proves useful in the evaluation of zirconia reinforced composite overlays, placed in an environment characterized by high occlusal forces.

Latest performance of ArF immersion scanner NSR-S630D for high-volume manufacturing for 7nm node

NASA Astrophysics Data System (ADS)

Funatsu, Takayuki; Uehara, Yusaku; Hikida, Yujiro; Hayakawa, Akira; Ishiyama, Satoshi; Hirayama, Toru; Kono, Hirotaka; Shirata, Yosuke; Shibazaki, Yuichi

2015-03-01

In order to achieve stable operation in cutting-edge semiconductor manufacturing, Nikon has developed NSR-S630D with extremely accurate overlay while maintaining throughput in various conditions resembling a real production environment. In addition, NSR-S630D has been equipped with enhanced capabilities to maintain long-term overlay stability and user interface improvement all due to our newly developed application software platform. In this paper, we describe the most recent S630D performance in various conditions similar to real productions. In a production environment, superior overlay accuracy with high dose conditions and high throughput are often required; therefore, we have performed several experiments with high dose conditions to demonstrate NSR's thermal aberration capabilities in order to achieve world class overlay performance. Furthermore, we will introduce our new software that enables long term overlay performance.

Evaluation of Tack Coat Bond Strength Tests

DOT National Transportation Integrated Search

2018-05-01

Poor bonding between asphalt pavement overlays and the substrate pavement layer can greatly influence the long term performance of hot mix asphalt (HMA) in the form of premature cracking and fatigue. The primary method to achieve bonding between laye...

Tungsten-reinforced tantalum

NASA Technical Reports Server (NTRS)

Bacigalupi, R. J.; Breitwieser, R.

1972-01-01

Method is described for producing tungsten-reinforced tantalum, a material possessing the high temperature strength of tungsten and room temperature ductility and weldability of tantalum. This material is produced by bonding together and overlaying structure of tungsten wires with chemical vapor deposited tantalum.

Crack and seat concrete pavement

DOT National Transportation Integrated Search

1987-09-01

Prevention of reflective cracking in HMAC overlays placed over PCCP has been based on experience gained from trial and error methods of in-service pavements in many states. Arizona recently utilized this technique on a PCCP section of Interstate 40 b...

Tack Coat Performance and Materials Study

DOT National Transportation Integrated Search

2017-06-01

A good bond provided by a tack coat can improve performance of asphalt overlays. The objectives of this research were: (1) develop a method for testing the bond between pavement layers; (2) evaluate the bond performance and predict long-term performa...

Effects of Spectral Overlays on Reading Performance of Brazilian Elementary School Children.

PubMed

Garcia, Ana Carla Oliveira; Momensohn-Santos, Teresa Maria; Vilhena, Douglas de Araújo

2018-03-20

To investigate the effects of spectral overlays on reading performance of Brazilian elementary school children. Sixty-eight children (aged 9-12 years) enrolled in the 5th and 6th grade were included in the study. The Rate of Reading Test (RRT - Brazilian Portuguese version) was used to evaluate reading speed and the Irlen Reading Perceptual Scale was used to allocate the sample according to reading difficulty/discomfort symptoms and to define the optimal spectral overlays. A total of 13% of the children presented an improvement of at least 15% in reading speed with the use of spectral overlays. Pupils with severe reading difficulties tended to have more improvement in RRT with spectral overlays. Children with severe reading discomfort obtained the highest gains in RRT, with an average of 9.6% improvement with intervention, compared to a decrease of -8.2% in the control group. Participants with severe discomfort had an odds ratio of 3.36 to improve reading speed with intervention compared to the control group. The use of spectral overlays can improve reading performance, particularly in those children with severe visual discomfort. © 2018 S. Karger AG, Basel.

Electronic structure of uranium overlayers on magnesium and aluminium

NASA Astrophysics Data System (ADS)

Gouder, T.

1997-06-01

We studied U overlayers on polycrystalline Mg and Al by X-ray and ultra-violet photoelectron spectroscopies (XPS and UPS, respectively), and compared the mode of growth and the evolution of the electronic structure as a function of coverage. The goal of this work was to detect localization, or at least correlation effects, in U overlayers and U substrate near surface alloys, which were expected to occur because of the reduced U 5f bandwidth in these systems. On Mg, U deposits as a pure overlayer without any interdiffusion, while on Al spontaneous interdiffusion takes place. The U 4f spectra of {U}/{Mg} show only weak correlation satellites. Nevertheless, the asymmetrical shape of the U 4f peak indicates 5f band narrowing. On Al, strong correlation satellites are observed in addition to plasmon loss features. It seems that U-substrate interactions promote correlation effects, while the reduced coordination in overlayers plays a less important role. UPS valence-band (VB) spectra of the two systems look remarkably similar. They do not show any correlation satellites. With decreasing overlayer thickness the 5f peak narrows, which is attributed to 5f band narrowing at the surface.

Determination of the Microscopic Structure of Surface and Overlayers, Adsorbate-Adsorbate Interaction Energies, and Rates of Surface Processes.

DTIC Science & Technology

1982-12-28

molecular beam-surface scattering, high pressure microreactor , heterogeneous catalysis. :116. AmTRAC? ’CAuI1ae 4111, 8ee 1 111 It oesey -1lP d ify by...Crystallography.. . ..... ....................... 4 11. Design and Construction of a High Pressure Catalvtic Microreactor ... microreactor has been designed and constructed. This micro- reactor will be a useful adjunct to the molecular beam machine since in the former overall

Overlay leaves litho: impact of non-litho processes on overlay and compensation

NASA Astrophysics Data System (ADS)

Ruhm, Matthias; Schulz, Bernd; Cotte, Eric; Seltmann, Rolf; Hertzsch, Tino

2014-10-01

According to the ITRS roadmap [1], the overlay requirement for the 28nm node is 8nm. If we compare this number with the performance given by tool vendors for their most advanced immersion systems (which is < 3nm), there seems to remain a large margin. Does that mean that today's leading edge Fab has an easy life? Unfortunately not, as other contributors affecting overlay are emerging. Mask contributions and so-called non-linear wafer distortions are known effects that can impact overlay quite significantly. Furthermore, it is often forgotten that downstream (post-litho) processes can impact the overlay as well. Thus, it can be required to compensate for the effects of subsequent processes already at the lithography operation. Within our paper, we will briefly touch on the wafer distortion topic and discuss the limitations of lithography compensation techniques such as higher order corrections versus solving the root cause of the distortions. The primary focus will be on the impact of the etch processes on the pattern placement error. We will show how individual layers can get affected differently by showing typical wafer signatures. However, in contrast to the above-mentioned wafer distortion topic, lithographic compensation techniques can be highly effective to reduce the placement error significantly towards acceptable levels (see Figure 1). Finally we will discuss the overall overlay budget for a 28nm contact to gate case by taking the impact of the individual process contributors into account.

Approaches of multilayer overlay process control for 28nm FD-SOI derivative applications

NASA Astrophysics Data System (ADS)

Duclaux, Benjamin; De Caunes, Jean; Perrier, Robin; Gatefait, Maxime; Le Gratiet, Bertrand; Chapon, Jean-Damien; Monget, Cédric

2018-03-01

Derivative technology like embedded Non-Volatile Memories (eNVM) is raising new types of challenges on the "more than Moore" path. By its construction: overlay is critical across multiple layers, by its running mode: usage of high voltage are stressing leakages and breakdown, and finally with its targeted market: Automotive, Industry automation, secure transactions… which are all requesting high device reliability (typically below 1ppm level). As a consequence, overlay specifications are tights, not only between one layer and its reference, but also among the critical layers sharing the same reference. This work describes a broad picture of the key points for multilayer overlay process control in the case of a 28nm FD-SOI technology and its derivative flows. First, the alignment trees of the different flow options have been optimized using a realistic process assumptions calculation for indirect overlay. Then, in the case of a complex alignment tree involving heterogeneous scanner toolset, criticality of tool matching between reference layer and critical layers of the flow has been highlighted. Improving the APC control loops of these multilayer dependencies has been studied with simulations of feed-forward as well as implementing new rework algorithm based on multi-measures. Finally, the management of these measurement steps raises some issues for inline support and using calculations or "virtual overlay" could help to gain some tool capability. A first step towards multilayer overlay process control has been taken.

Overlay of multiframe SEM images including nonlinear field distortions

NASA Astrophysics Data System (ADS)

Babin, S.; Borisov, S.; Ivonin, I.; Nakazawa, S.; Yamazaki, Y.

2018-03-01

To reduce charging and shrinkage, CD-SEMs utilize low electron energies and multiframe imaging. This results in every next frame being altered due to stage and beam instability, as well as due to charging. Regular averaging of the frames blurs the edges; this directly effects the extracted values of critical dimensions. A technique was developed to overlay multiframe images without the loss of quality. This method takes into account drift, rotation, and magnification corrections, as well as nonlinear distortions due to wafer charging. A significant improvement in the signal to noise ratio and overall image quality without degradation of the feature's edge quality was achieved. The developed software is capable of working with regular and large size images up to 32K pixels in each direction.

An evaluation of interlayer stress absorbing composite (ISAC) reflective crack relief system

DOT National Transportation Integrated Search

2005-03-01

Reflective cracking of bituminous concrete overlays has long been a problem in pavement rehabilitation. Various types of interlayer systems and fabrics have been used to eliminate or slow the development of reflective cracks. These methods and produc...

75 FR 57376 - Modification of Class B Airspace; Chicago, IL

Federal Register 2010, 2011, 2012, 2013, 2014

2010-09-21

... multiple Soaring Clubs in the area, requested that the floor of Area F be raised to 5,000 feet mean sea... designed to ensure it does not encompass or overlay the airfields where the Sky Soaring Glider Club (Hampshire, IL) and the Windy City Soaring Association (Hinkley, IL) operations are located; as well as the...

Chapter 7. Additional studies using CFIRP treatments: Douglas-fir genetics and ambrosia beetle log colonization.

Treesearch

Chris C. Maguire; W. Thomas Adams; Rick G. Kelsey

2005-01-01

As highlighted in previous chapters, the primary biological objectives of CFIRP were to assess impacts of diverse silvicultural treatments on vegetation structure and growth and on the abundance and diversity of wildlife. Stand conditions resulting from implementation of the CFIRP research design, however, provided for the overlay of additional research projects that...

Pre-impact fall detection system using dynamic threshold and 3D bounding box

NASA Astrophysics Data System (ADS)

Otanasap, Nuth; Boonbrahm, Poonpong

2017-02-01

Fall prevention and detection system have to subjugate many challenges in order to develop an efficient those system. Some of the difficult problems are obtrusion, occlusion and overlay in vision based system. Other associated issues are privacy, cost, noise, computation complexity and definition of threshold values. Estimating human motion using vision based usually involves with partial overlay, caused either by direction of view point between objects or body parts and camera, and these issues have to be taken into consideration. This paper proposes the use of dynamic threshold based and bounding box posture analysis method with multiple Kinect cameras setting for human posture analysis and fall detection. The proposed work only uses two Kinect cameras for acquiring distributed values and differentiating activities between normal and falls. If the peak value of head velocity is greater than the dynamic threshold value, bounding box posture analysis will be used to confirm fall occurrence. Furthermore, information captured by multiple Kinect placed in right angle will address the skeleton overlay problem due to single Kinect. This work contributes on the fusion of multiple Kinect based skeletons, based on dynamic threshold and bounding box posture analysis which is the only research work reported so far.

DFT study on bimetallic Pt/Cu(1 1 1) as efficient catalyst for H2 dissociation

NASA Astrophysics Data System (ADS)

Liu, Ji; Fan, Xiaofeng; Sun, Chang Q.; Zhu, Weiguang

2018-05-01

To design a catalyst for the dissociation of H2 with better CO-tolerance performance is very important for proton exchange membrane fuel cells (PEMFCs) towards high efficiency. With slab model, the catalytic properties of overlayer Pt on Cu substrate (Pt/Cu) are analyzed by first-principle calculations. The CO saturation coverage (40%) on Pt2/Cu is found to be lower than that of pure Pt (about 75%). The dissociation barrier from H2 to H is less than 0.4 eV under the saturation coverage of CO. On the basis of kinetics of proton formation, the CO-tolerance ability on double-layer Pt with Cu is found to be greatly improved compared with that on pure Pt. It is expected that Pt overlayer on Cu(1 1 1) is a potential anode material with lower cost for PEMFCs.

Full-mouth composite rehabilitation of a mixed erosion and attrition patient: a case report with v-shaped veneers and ultra-thin CAD/CAM composite overlays.

PubMed

Bahillo, Jose; Jané, Luis; Bortolotto, Tissiana; Krejci, Ivo; Roig, Miguel

2014-10-01

Loss of tooth substance has become a common pathology in modern society. It is of multifactorial origin, may be induced by a chemical process or by excessive attrition, and frequently has a combined etiology. Particular care should be taken when diagnosing the cause of dental tissue loss, in order to minimize its impact. Several publications have proposed the use of minimally invasive procedures to treat such patients in preference to traditional full-crown rehabilitation. The use of composite resins, in combination with improvements in dental adhesion, allows a more conservative approach. In this paper, we describe the step-by-step procedure of full-mouth composite rehabilitation with v-shaped veneers and ultra-thin computer-aided design/computer-assisted manufacture (CAD/CAM)- generated composite overlays in a young patient with a combination of erosion and attrition disorder.

Tuning the Two-Dimensional Electron Liquid at Oxide Interfaces by Buffer-Layer-Engineered Redox Reactions.

PubMed

Chen, Yunzhong; Green, Robert J; Sutarto, Ronny; He, Feizhou; Linderoth, Søren; Sawatzky, George A; Pryds, Nini

2017-11-08

Polar discontinuities and redox reactions provide alternative paths to create two-dimensional electron liquids (2DELs) at oxide interfaces. Herein, we report high mobility 2DELs at interfaces involving SrTiO 3 (STO) achieved using polar La 7/8 Sr 1/8 MnO 3 (LSMO) buffer layers to manipulate both polarities and redox reactions from disordered overlayers grown at room temperature. Using resonant X-ray reflectometry experiments, we quantify redox reactions from oxide overlayers on STO as well as polarity induced electronic reconstruction at epitaxial LSMO/STO interfaces. The analysis reveals how these effects can be combined in a STO/LSMO/disordered film trilayer system to yield high mobility modulation doped 2DELs, where the buffer layer undergoes a partial transformation from perovskite to brownmillerite structure. This uncovered interplay between polar discontinuities and redox reactions via buffer layers provides a new approach for the design of functional oxide interfaces.

Light emitting ceramic device

DOEpatents

Valentine, Paul; Edwards, Doreen D.; Walker, Jr., William John; Slack, Lyle H.; Brown, Wayne Douglas; Osborne, Cathy; Norton, Michael; Begley, Richard

2010-05-18

A light-emitting ceramic based panel, hereafter termed "electroceramescent" panel, is herein claimed. The electroceramescent panel is formed on a substrate providing mechanical support as well as serving as the base electrode for the device. One or more semiconductive ceramic layers directly overlay the substrate, and electrical conductivity and ionic diffusion are controlled. Light emitting regions overlay the semiconductive ceramic layers, and said regions consist sequentially of a layer of a ceramic insulation layer and an electroluminescent layer, comprised of doped phosphors or the equivalent. One or more conductive top electrode layers having optically transmissive areas overlay the light emitting regions, and a multi-layered top barrier cover comprising one or more optically transmissive non-combustible insulation layers overlay said top electrode regions.

Application of thin-layer chromatography/infrared matrix-assisted laser desorption/ionization orthogonal time-of-flight mass spectrometry to structural analysis of bacteria-binding glycosphingolipids selected by affinity detection.

PubMed

Müsken, Anne; Souady, Jamal; Dreisewerd, Klaus; Zhang, Wenlan; Distler, Ute; Peter-Katalinić, Jasna; Miller-Podraza, Halina; Karch, Helge; Müthing, Johannes

2010-04-15

Glycosphingolipids (GSLs) play key roles in the manifestation of infectious diseases as attachment sites for pathogens. The thin-layer chromatography (TLC) overlay assay represents one of the most powerful approaches for the detection of GSL receptors of microorganisms. Here we report on the direct structural characterization of microbial GSL receptors by employment of the TLC overlay assay combined with infrared matrix-assisted laser desorption/ionization orthogonal time-of-flight mass spectrometry (IR-MALDI-o-TOF-MS). The procedure includes TLC separation of GSL mixtures, overlay of the chromatogram with GSL-specific bacteria, detection of bound microbes with primary antibodies against bacterial surface proteins and appropriate alkaline phosphatase labeled secondary antibodies, and in situ MS analysis of bacteria-specific GSL receptors. The combined method works on microgram scale of GSL mixtures and is advantageous in that it omits laborious and time-consuming GSL extraction from the silica gel layer. This technique was successfully applied to the compositional analysis of globo-series neutral GSLs recognized by P-fimbriated Escherichia coli bacteria, which were used as model microorganisms for infection of the human urinary tract. Thus, direct TLC/IR-MALDI-o-TOF-MS adds a novel facet to this fast and sensitive method offering a wide range of applications for the investigation of carbohydrate-specific pathogens involved in human infectious diseases. 2010 John Wiley & Sons, Ltd.

Sintered electrode for solid oxide fuel cells

DOEpatents

Ruka, Roswell J.; Warner, Kathryn A.

1999-01-01

A solid oxide fuel cell fuel electrode is produced by a sintering process. An underlayer is applied to the electrolyte of a solid oxide fuel cell in the form of a slurry, which is then dried. An overlayer is applied to the underlayer and then dried. The dried underlayer and overlayer are then sintered to form a fuel electrode. Both the underlayer and the overlayer comprise a combination of electrode metal such as nickel, and stabilized zirconia such as yttria-stabilized zirconia, with the overlayer comprising a greater percentage of electrode metal. The use of more stabilized zirconia in the underlayer provides good adhesion to the electrolyte of the fuel cell, while the use of more electrode metal in the overlayer provides good electrical conductivity. The sintered fuel electrode is less expensive to produce compared with conventional electrodes made by electrochemical vapor deposition processes. The sintered electrodes exhibit favorable performance characteristics, including good porosity, adhesion, electrical conductivity and freedom from degradation.

A Preliminary Study of Building a Transmission Overlay for Regional US Power Grid

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lei, Yin; Li, Yalong; Liu, Yilu

2015-01-01

Many European countries have taken steps toward a Supergrid in order to transmit large amount of intermittent and remote renewable energy over long distance to load centers. In the US, as the expected increase in renewable generation and electricity demand, similar problem arises. A potential solution is to upgrade the transmission system at a higher voltage by constructing a new overlay grid. This paper will first address basic requirements for such an overlay grid. Potential transmission technologies will also be discussed. A multi-terminal VSC HVDC model is developed in DSATools to implement the overlay grid and a test case onmore » a regional NPCC system will be simulated. Another test system of entire US power grid, with three different interconnections tied together using back-to-back HVDC, is also introduced in this paper. Building an overlay system on top of this test case is ongoing, and will be discussed in future work.« less

Study of μDBO overlay target size reduction for application broadening

NASA Astrophysics Data System (ADS)

Calado, Victor; Dépré, Jérôme; Massacrier, Clément; Tarabrin, Sergey; van Haren, Richard; Dettoni, Florent; Bouyssou, Régis; Dezauzier, Christophe

2018-03-01

With these proceedings we present μ-diffraction-based overlay (μDBO) targets that are well below the currently supported minimum size of 10×10 μm2 . We have been capable of measuring overlay targets as small as 4×4 μm2 with our latest generation YieldStar system. Furthermore we find an excellent precision (TMU < 0.33 nm for 6 × 6 μm2 ) without any compromise on throughput (MAM time < 60 ms). At last a study that compares four generations of YieldStar systems show clearly that the latest generation YieldStar systems is much better capable of reading small overlay targets such that the performance of a 16 × 16 μm2 on an early generation YieldStar 2nd-gen is comparable to that of a 8 × 8 μm2 on the latest YieldStar 5th-gen. This work enables a smaller metrology footprint, more placement flexibility and in-die overlay metrology solutions.

Sintered electrode for solid oxide fuel cells

DOEpatents

Ruka, R.J.; Warner, K.A.

1999-06-01

A solid oxide fuel cell fuel electrode is produced by a sintering process. An underlayer is applied to the electrolyte of a solid oxide fuel cell in the form of a slurry, which is then dried. An overlayer is applied to the underlayer and then dried. The dried underlayer and overlayer are then sintered to form a fuel electrode. Both the underlayer and the overlayer comprise a combination of electrode metal such as nickel, and stabilized zirconia such as yttria-stabilized zirconia, with the overlayer comprising a greater percentage of electrode metal. The use of more stabilized zirconia in the underlayer provides good adhesion to the electrolyte of the fuel cell, while the use of more electrode metal in the overlayer provides good electrical conductivity. The sintered fuel electrode is less expensive to produce compared with conventional electrodes made by electrochemical vapor deposition processes. The sintered electrodes exhibit favorable performance characteristics, including good porosity, adhesion, electrical conductivity and freedom from degradation. 4 figs.

Ru sub 3 (CO) sub 12 and Mo (CO) sub 6 overlayers adsorbed on Ru(001) and Au/Ru and their interaction with electrons and photons: An infrared reflection--absorption study

DOE Office of Scientific and Technical Information (OSTI.GOV)

Malik, I.J.; Hrbek, J.

1991-05-01

We studied adsorbed Ru{sub 3}(CO){sub 12} and Mo (CO){sub 6} overlayers on Ru(001) and Au/Ru surfaces by infrared reflection--absorption spectroscopy (IRAS) and thermal desorption spectroscopy (TDS). We characterized the C--O stretching mode of both metal carbonyls (4 cm{sup {minus}1} FWHM) and a deformation mode of Mo (CO){sub 6} at 608 cm{sup {minus}1} with an unusually narrow FWHM of 1 cm{sup {minus}1}. Both IRAS and TDS data suggest adsorption and desorption of metal carbonyls as molecular species with a preferential orientation in the overlayers. We discuss annealing experiments of Ru{sub 3}(CO){sub 12}/Ru(001), the interaction of Ru{sub 3}(CO){sub 12} overlayers with electronsmore » of up to 100-eV energy, and the interaction of Mo (CO){sub 6} overlayers with 300-nm photons.« less

Distributed fiber optic sensor-enhanced detection and prediction of shrinkage-induced delamination of ultra-high-performance concrete overlay

NASA Astrophysics Data System (ADS)

Bao, Yi; Valipour, Mahdi; Meng, Weina; Khayat, Kamal H.; Chen, Genda

2017-08-01

This study develops a delamination detection system for smart ultra-high-performance concrete (UHPC) overlays using a fully distributed fiber optic sensor. Three 450 mm (length) × 200 mm (width) × 25 mm (thickness) UHPC overlays were cast over an existing 200 mm thick concrete substrate. The initiation and propagation of delamination due to early-age shrinkage of the UHPC overlay were detected as sudden increases and their extension in spatial distribution of shrinkage-induced strains measured from the sensor based on pulse pre-pump Brillouin optical time domain analysis. The distributed sensor is demonstrated effective in detecting delamination openings from microns to hundreds of microns. A three-dimensional finite element model with experimental material properties is proposed to understand the complete delamination process measured from the distributed sensor. The model is validated using the distributed sensor data. The finite element model with cohesive elements for the overlay-substrate interface can predict the complete delamination process.

Optimizing Training Event Schedules at Naval Air Station Fallon

DTIC Science & Technology

2018-03-01

popularly known as Topgun. Fallon training range airspace overlays 10,200 square miles and contains ground ranges for bombing and electronic warfare. In...Fighter Weapons School, popularly known as Topgun. Fallon training range airspace overlays 10,200 square miles and contains ground ranges for bombing and...popularly known as Topgun. Fallon training range airspace overlays 10,200 squaremiles, and contains ground ranges for bombing and electronic warfare. In

Cloud Computing at the Tactical Edge

DTIC Science & Technology

2012-10-01

Cloud Computing (CloudCom ’09). Bejing , China , December 2009. Springer-Verlag, 2009. [Marinelli 2009] Marinelli, E. Hyrax: Cloud Computing on Mobile...offloading is appropriate. Each applica- tion overlay is generated from the same Base VM Image that resides in the cloudlet. In an opera - tional setting...overlay, the following opera - tions execute: 1. The overlay is decompressed using the tools listed in Section 4.2. 2. VM synthesis is performed through

Implementation and benefits of advanced process control for lithography CD and overlay

NASA Astrophysics Data System (ADS)

Zavyalova, Lena; Fu, Chong-Cheng; Seligman, Gary S.; Tapp, Perry A.; Pol, Victor

2003-05-01

Due to the rapidly reduced imaging process windows and increasingly stingent device overlay requirements, sub-130 nm lithography processes are more severely impacted than ever by systamic fault. Limits on critical dimensions (CD) and overlay capability further challenge the operational effectiveness of a mix-and-match environment using multiple lithography tools, as such mode additionally consumes the available error budgets. Therefore, a focus on advanced process control (APC) methodologies is key to gaining control in the lithographic modules for critical device levels, which in turn translates to accelerated yield learning, achieving time-to-market lead, and ultimately a higher return on investment. This paper describes the implementation and unique challenges of a closed-loop CD and overlay control solution in high voume manufacturing of leading edge devices. A particular emphasis has been placed on developing a flexible APC application capable of managing a wide range of control aspects such as process and tool drifts, single and multiple lot excursions, referential overlay control, 'special lot' handling, advanced model hierarchy, and automatic model seeding. Specific integration cases, including the multiple-reticle complementary phase shift lithography process, are discussed. A continuous improvement in the overlay and CD Cpk performance as well as the rework rate has been observed through the implementation of this system, and the results are studied.

The challenges of transitioning from linear to high-order overlay control in advanced lithography

NASA Astrophysics Data System (ADS)

Adel, M.; Izikson, P.; Tien, D.; Huang, C. K.; Robinson, J. C.; Eichelberger, B.

2008-03-01

In the lithography section of the ITRS 2006 update, at the top of the list of difficult challenges appears the text "overlay of multiple exposures including mask image placement". This is a reflection of the fact that today overlay is becoming a major yield risk factor in semiconductor manufacturing. Historically, lithographers have achieved sufficient alignment accuracy and hence layer to layer overlay control by relying on models which define overlay as a linear function of the field and wafer coordinates. These linear terms were easily translated to correctibles in the available exposure tool degrees of freedom on the wafer and reticle stages. However, as the 45 nm half pitch node reaches production, exposure tool vendors have begun to make available, and lithographers have begun to utilize so called high order wafer and field control, in which either look up table or high order polynomial models are modified on a product by product basis. In this paper, the major challenges of this transition will be described. It will include characterization of the sources of variation which need to be controlled by these new models and the overlay and alignment sampling optimization problem which needs to be addressed, while maintaining the ever tightening demands on productivity and cost of ownership.

Reduction of image-based ADI-to-AEI overlay inconsistency with improved algorithm

NASA Astrophysics Data System (ADS)

Chen, Yen-Liang; Lin, Shu-Hong; Chen, Kai-Hsiung; Ke, Chih-Ming; Gau, Tsai-Sheng

2013-04-01

In image-based overlay (IBO) measurement, the measurement quality of various measurement spectra can be judged by quality indicators and also the ADI-to-AEI similarity to determine the optimum light spectrum. However we found some IBO measured results showing erroneous indication of wafer expansion from the difference between the ADI and the AEI maps, even after their measurement spectra were optimized. To reduce this inconsistency, an improved image calculation algorithm is proposed in this paper. Different gray levels composed of inner- and outer-box contours are extracted to calculate their ADI overlay errors. The symmetry of intensity distribution at the thresholds dictated by a range of gray levels is used to determine the particular gray level that can minimize the ADI-to-AEI overlay inconsistency. After this improvement, the ADI is more similar to AEI with less expansion difference. The same wafer was also checked by the diffraction-based overlay (DBO) tool to verify that there is no physical wafer expansion. When there is actual wafer expansion induced by large internal stress, both the IBO and the DBO measurements indicate similar expansion results. The scanning white-light interference microscope was used to check the variation of wafer warpage during the ADI and AEI stages. It predicts a similar trend with the overlay difference map, confirming the internal stress.

Direct method for imaging elemental distribution profiles with long-period x-ray standing waves

NASA Astrophysics Data System (ADS)

Kohli, Vaibhav; Bedzyk, Michael J.; Fenter, Paul

2010-02-01

A model-independent Fourier-inversion method for imaging elemental profiles from multilayer and total-external reflection x-ray standing wave (XSW) data is developed for the purpose of understanding the assembly of atoms, ions, and molecules at well-defined interfaces in complex environments. The direct-method formalism is derived for the case of a long-period XSW generated by low-angle specular reflection in an attenuating overlayer medium. It is validated through comparison with simulated and experimental data to directly obtain an elemental distribution contained within the overlayer. We demonstrate this formalism by extracting the one-dimensional profile of Ti normal to the surface for a TiO2/Si/Mo trilayer deposited on a Si substrate using the TiKα fluorescence yield measured in air and under an aqueous electrolyte. The model-independent results demonstrate reduced coherent fractions for the in situ results associated with an incoherency of the x-ray beam (which are attributed to fluorescence excitation by diffusely or incoherently scattered x-rays). The uniqueness and limitations of the approach are discussed.

Effect of Auxiliary Preheating of the Filler Wire on Quality of Gas Metal Arc Stainless Steel Claddings

NASA Astrophysics Data System (ADS)

Shahi, Amandeep S.; Pandey, Sunil

2008-02-01

Weld cladding is a process for producing surfaces with good corrosion resistant properties by means of depositing/laying of stainless steels on low-carbon steel components with an objective of achieving maximum economy and enhanced life. The aim of the work presented here was to investigate the effect of auxiliary preheating of the solid filler wire in mechanized gas metal arc welding (GMAW) process (by using a specially designed torch to preheat the filler wire independently, before its emergence from the torch) on the quality of the as-welded single layer stainless steel overlays. External preheating of the filler wire resulted in greater contribution of arc energy by resistive heating due to which significant drop in the main welding current values and hence low dilution levels were observed. Metallurgical aspects of the as welded overlays such as chemistry, ferrite content, and modes of solidification were studied to evaluate their suitability for service and it was found that claddings obtained through the preheating arrangement, besides higher ferrite content, possessed higher content of chromium, nickel, and molybdenum and lower content of carbon as compared to conventional GMAW claddings, thereby giving overlays with superior mechanical and corrosion resistance properties. The findings of this study not only establish the technical superiority of the new process, but also, owing to its productivity-enhanced features, justify its use for low-cost surfacing applications.

Cloud-Induced Uncertainty for Visual Navigation

DTIC Science & Technology

2014-12-26

images at the pixel level. The result is a method that can overlay clouds with various structures on top of any desired image to produce realistic...cloud-shaped structures . The primary contribution of this research, however, is to investigate and quantify the errors in features due to clouds. The...of clouds types, this method does not emulate the true structure of clouds. An alternative popular modern method of creating synthetic clouds is known

Programing Procedures Manual (PPM).

DTIC Science & Technology

1981-12-15

terms ’reel’, ’unit’, and ’volume’ are synonymous and completely interchangeable in the CLOSE statement. Treatment of sequential mass storage files is...logically equivalent to the treatment of a file on tape or analogous sequential media. * For the purpose of showing the effect of various types of CLOSE...Overlay Area CA6 Address of Abend Relative to beginning of overlay segment The programer can now refer to the compile source listing for the overlay

Corrosion control of cement-matrix and aluminum-matrix composites

NASA Astrophysics Data System (ADS)

Hou, Jiangyuan

Corrosion control of composite materials, particularly aluminum-matrix and cement-matrix composites, was addressed by surface treatment, composite formulation and cathodic protection. Surface treatment methods studied include anodization in the case of aluminum-matrix composites and oxidation treatment (using water) in the case of steel rebar for reinforcing concrete. The effects of reinforcement species (aluminum nitride (AIN) versus silicon carbide (SiC) particles) in the aluminum-matrix composites and of admixtures (carbon fibers, silica fume, latex and methylcellulose) in concrete on the corrosion resistance of composites were addressed. Moreover, the effect of admixtures in concrete and of admixtures in mortar overlay (as anode on concrete) on the efficiency of cathodic protection of steel reinforced concrete was studied. For SiC particle filled aluminum, anodization was performed successfully in an acid electrolyte, as for most aluminum alloys. However, for AlN particle filled aluminum, anodization needs to be performed in an alkaline (0.7 N NaOH) electrolyte instead. The concentration of NaOH in the electrolyte was critical. It was found that both silica fume and latex improved the corrosion resistance of rebar in concrete in both Ca(OH)sb2 and NaCl solutions, mainly because these admixtures decreased the water absorptivity. Silica fume was more effective than latex. Methylcellulose improved the corrosion resistance of rebar in concrete a little in Ca(OH)sb2 solution. Carbon fibers decreased the corrosion resistance of rebar in concrete, but this effect could be made up for by either silica fume or latex, such that silica fume was more effective than latex. Surface treatment in the form of water immersion for two days was found to improve the corrosion resistance of rebar in concrete. This treatment resulted in a thin uniform layer of black iron oxide (containing Fesp{2+}) on the entire rebar surface except on the cross-sectional surface. Prior to the treatment, the surface was non-uniform due to rusting. Sand blasting also made the surface uniform, but is an expensive process, compared to the water immersion method. For cathodic protection of steel rebar reinforced concrete, mortar overlay containing carbon fibers and latex needed 11% less driving voltage to protect the rebar in concrete than plain mortar overlay. However, multiple titanium electrical contacts were necessary, whether the overlay contained carbon fibers or not. For the same overlay (containing carbon fibers and latex), admixtures in the concrete also made a significant difference on the effect of cathodic protection; concrete with carbon fibers and silica fume needed 18% less driving voltage than plain concrete and 28% less than concrete containing silica fume.

Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides.

PubMed

Teng, Jie; Dumon, Pieter; Bogaerts, Wim; Zhang, Hongbo; Jian, Xigao; Han, Xiuyou; Zhao, Mingshan; Morthier, Geert; Baets, Roel

2009-08-17

Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220 nm-height SOI waveguides is found to be around 350 nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/degrees C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15 microm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50 dB/cm after overlaying a polymer cladding. (c) 2009 Optical Society of America

A study of swing-curve physics in diffraction-based overlay

NASA Astrophysics Data System (ADS)

Bhattacharyya, Kaustuve; den Boef, Arie; Storms, Greet; van Heijst, Joost; Noot, Marc; An, Kevin; Park, Noh-Kyoung; Jeon, Se-Ra; Oh, Nang-Lyeom; McNamara, Elliott; van de Mast, Frank; Oh, SeungHwa; Lee, Seung Yoon; Hwang, Chan; Lee, Kuntack

2016-03-01

With the increase of process complexity in advanced nodes, the requirements of process robustness in overlay metrology continues to tighten. Especially with the introduction of newer materials in the film-stack along with typical stack variations (thickness, optical properties, profile asymmetry etc.), the signal formation physics in diffraction-based overlay (DBO) becomes an important aspect to apply in overlay metrology target and recipe selection. In order to address the signal formation physics, an effort is made towards studying the swing-curve phenomena through wavelength and polarizations on production stacks using simulations as well as experimental technique using DBO. The results provide a wealth of information on target and recipe selection for robustness. Details from simulation and measurements will be reported in this technical publication.

TECHNIQUES FOR THE FABRICATION OF GEOMEMBRANE FILLED SEAMS

EPA Science Inventory

Geomembranes employed to overlay the excavation for landfills must be seamed together on-site at the landfill. To ensure the integrity of the containment system of the landfill, these sheets or blankets must be carefully seamed. Present methods in common use are: extrusion fil...

Mode-converting coupler for silicon-on-sapphire devices

NASA Astrophysics Data System (ADS)

Zlatanovic, S.; Offord, B. W.; Owen, M.; Shimabukuro, R.; Jacobs, E. W.

2015-02-01

Silicon-on-sapphire devices are attractive for the mid-infrared optical applications up to 5 microns due to the low loss of both silicon and sapphire in this wavelength band. Designing efficient couplers for silicon-on-sapphire devices presents a challenge due to a highly confined mode in silicon and large values of refractive index of both silicon and sapphire. Here, we present design, fabrication, and measurements of a mode-converting coupler for silicon-on-sapphire waveguides. We utilize a mode converter layout that consists of a large waveguide that is overlays a silicon inverse tapered waveguide. While this geometry was previously utilized for silicon-on-oxide devices, the novelty is in using materials that are compatible with the silicon-on-sapphire platform. In the current coupler the overlaying waveguide is made of silicon nitride. Silicon nitride is the material of choice because of the large index of refraction and low absorption from near-infrared to mid-infrared. The couplers were fabricated using a 0.25 micron silicon-on-sapphire process. The measured coupling loss from tapered lensed silica fibers to the silicon was 4.8dB/coupler. We will describe some challenges in fabrication process and discuss ways to overcome them.

V-DRASTIC: Using visualization to engage policymakers in groundwater vulnerability assessment

NASA Astrophysics Data System (ADS)

Bojórquez-Tapia, Luis A.; Cruz-Bello, Gustavo M.; Luna-González, Laura; Juárez, Lourdes; Ortiz-Pérez, Mario A.

2009-06-01

SummaryGroundwater vulnerability mapping is increasingly being used to design aquifer protection and management strategies. This paper presents a dynamic visualization method to groundwater vulnerability mapping. This method—called V-DRASTIC—extends the capacities of DRASTIC, an overlay/index technique that has been applied worldwide to evaluate the condition of hydrogeological factors and determine groundwater vulnerability at regional scales. V-DRASTIC is based upon psychophysics' principles (a theory that describes the people's response to a stimulus) to generate alternative groundwater vulnerability categorization schemes. These are used as inputs in a fuzzy pattern recognition procedure to enable planners, decision makers and stakeholders identify which scheme conveys meaningful information regarding groundwater vulnerability across a territory. V-DRASTIC was applied in the groundwater vulnerability assessment of two urban watersheds in Mexico.

Energy barrier analysis of Nd-Fe-B thin films

NASA Astrophysics Data System (ADS)

Goto, R.; Okamoto, S.; Kikuchi, N.; Kitakami, O.

2015-05-01

The magnetization reversal mechanism of a permanent magnet has long been a controversial issue, which is closely related to the so-called coercivity problem. It is well known that the energy barrier for magnetization reversal contains essential information on reversal process. In this study, we propose a method to analyze the energy barrier function for the magnetization reversal. Preferentially (001) oriented Nd-Fe-B films with and without a Nd overlayer are used as model magnets. By combining the magnetic viscosity and time dependent coercivity measurements, the barrier function has been successfully evaluated. As a result, although the Nd-Fe-B films with and without Nd overlayer exhibit different magnetic behaviors, the power indices for their energy barrier are almost the same, suggesting that the magnetization reversal proceeds in a similar mode.

Managing Network Partitions in Structured P2P Networks

NASA Astrophysics Data System (ADS)

Shafaat, Tallat M.; Ghodsi, Ali; Haridi, Seif

Structured overlay networks form a major class of peer-to-peer systems, which are touted for their abilities to scale, tolerate failures, and self-manage. Any long-lived Internet-scale distributed system is destined to face network partitions. Consequently, the problem of network partitions and mergers is highly related to fault-tolerance and self-management in large-scale systems. This makes it a crucial requirement for building any structured peer-to-peer systems to be resilient to network partitions. Although the problem of network partitions and mergers is highly related to fault-tolerance and self-management in large-scale systems, it has hardly been studied in the context of structured peer-to-peer systems. Structured overlays have mainly been studied under churn (frequent joins/failures), which as a side effect solves the problem of network partitions, as it is similar to massive node failures. Yet, the crucial aspect of network mergers has been ignored. In fact, it has been claimed that ring-based structured overlay networks, which constitute the majority of the structured overlays, are intrinsically ill-suited for merging rings. In this chapter, we motivate the problem of network partitions and mergers in structured overlays. We discuss how a structured overlay can automatically detect a network partition and merger. We present an algorithm for merging multiple similar ring-based overlays when the underlying network merges. We examine the solution in dynamic conditions, showing how our solution is resilient to churn during the merger, something widely believed to be difficult or impossible. We evaluate the algorithm for various scenarios and show that even when falsely detecting a merger, the algorithm quickly terminates and does not clutter the network with many messages. The algorithm is flexible as the tradeoff between message complexity and time complexity can be adjusted by a parameter.

Diagnostic performance and color overlay pattern in shear wave elastography (SWE) for palpable breast mass.

PubMed

Park, Jiyoon; Woo, Ok Hee; Shin, Hye Seon; Cho, Kyu Ran; Seo, Bo Kyoung; Kang, Eun Young

2015-10-01

The purpose of this study is to evaluate the diagnostic performance of SWE in palpable breast mass and to compare with color overlay pattern in SWE with conventional US and quantitative SWE for assessing palpable breast mass. SWE and conventional breast US were performed in 133 women with 156 palpable breast lesions (81 benign, 75 malignant) between August 2013 to June 2014. Either pathology or periodic imaging surveillance more than 2 years was a reference standard. Existence of previous image was blinded to performing radiologists. US BI-RADS final assessment, qualitative and quantitative SWE measurements were evaluated. Diagnostic performances of grayscale US, SWE and US combined to SWE were calculated and compared. Correlation between pattern classification and quantitative SWE was evaluated. Both color overlay pattern and quantitative SWE improved the specificity of conventional US, from 81.48% to 96.30% (p=0.0005), without improvement in sensitivity. Color overlay pattern was significantly related to all quantitative SWE parameters and malignancy rate (p<0.0001.). The optimal cutoff of color overlay pattern was between 2 and 3. Emax with optimal cutoff at 45.1 kPa showed the highest Az value, sensitivity, specificity and accuracy among other quantitative SWE parameters (p<0.0001). Echogenic halo on grayscale US showed significant correlation with color overlay pattern and pathology (p<0.0001). In evaluation of palpable breast mass, conventional US combine to SWE improves specificity and reduces the number of biopsies that ultimately yield a benign result. Color overlay pattern classification is more quick and easy and may represent quantitative SWE measurements with similar diagnostic performances. Copyright © 2015 Elsevier Ireland Ltd. All rights reserved.

A complete methodology towards accuracy and lot-to-lot robustness in on-product overlay metrology using flexible wavelength selection

NASA Astrophysics Data System (ADS)

Bhattacharyya, Kaustuve; den Boef, Arie; Noot, Marc; Adam, Omer; Grzela, Grzegorz; Fuchs, Andreas; Jak, Martin; Liao, Sax; Chang, Ken; Couraudon, Vincent; Su, Eason; Tzeng, Wilson; Wang, Cathy; Fouquet, Christophe; Huang, Guo-Tsai; Chen, Kai-Hsiung; Wang, Y. C.; Cheng, Kevin; Ke, Chih-Ming; Terng, L. G.

2017-03-01

The optical coupling between gratings in diffraction-based overlay triggers a swing-curve1,6 like response of the target's signal contrast and overlay sensitivity through measurement wavelengths and polarizations. This means there are distinct measurement recipes (wavelength and polarization combinations) for a given target where signal contrast and overlay sensitivity are located at the optimal parts of the swing-curve that can provide accurate and robust measurements. Some of these optimal recipes can be the ideal choices of settings for production. The user has to stay away from the non-optimal recipe choices (that are located on the undesirable parts of the swing-curve) to avoid possibilities to make overlay measurement error that can be sometimes (depending on the amount of asymmetry and stack) in the order of several "nm". To accurately identify these optimum operating areas of the swing-curve during an experimental setup, one needs to have full-flexibility in wavelength and polarization choices. In this technical publication, a diffraction-based overlay (DBO) measurement tool with many choices of wavelengths and polarizations is utilized on advanced production stacks to study swing-curves. Results show that depending on the stack and the presence of asymmetry, the swing behavior can significantly vary and a solid procedure is needed to identify a recipe during setup that is robust against variations in stack and grating asymmetry. An approach is discussed on how to use this knowledge of swing-curve to identify recipe that is not only accurate at setup, but also robust over the wafer, and wafer-to-wafer. KPIs are reported in run-time to ensure the quality / accuracy of the reading (basically acting as an error bar to overlay measurement).

Augmented Reality Visualization with Use of Image Overlay Technology for MR Imaging–guided Interventions: Assessment of Performance in Cadaveric Shoulder and Hip Arthrography at 1.5 T

PubMed Central

Fritz, Jan; U-Thainual, Paweena; Ungi, Tamas; Flammang, Aaron J.; Fichtinger, Gabor; Iordachita, Iulian I.

2012-01-01

Purpose: To prospectively assess overlay technology in providing accurate and efficient targeting for magnetic resonance (MR) imaging–guided shoulder and hip joint arthrography. Materials and Methods: A prototype augmented reality image overlay system was used in conjunction with a clinical 1.5-T MR imager. A total of 24 shoulder joint and 24 hip joint injections were planned in 12 human cadavers. Two operators (A and B) participated, each performing procedures on different cadavers using image overlay guidance. MR imaging was used to confirm needle positions, monitor injections, and perform MR arthrography. Accuracy was assessed according to the rate of needle adjustment, target error, and whether the injection was intraarticular. Efficiency was assessed according to arthrography procedural time. Operator differences were assessed with comparison of accuracy and procedure times between the operators. Mann-Whitney U test and Fisher exact test were used to assess group differences. Results: Forty-five arthrography procedures (23 shoulders, 22 hips) were performed. Three joints had prostheses and were excluded. Operator A performed 12 shoulder and 12 hip injections. Operator B performed 11 shoulder and 10 hip injections. Needle adjustment rate was 13% (six of 45; one for operator A and five for operator B). Target error was 3.1 mm ± 1.2 (standard deviation) (operator A, 2.9 mm ± 1.4; operator B, 3.5 mm ± 0.9). Intraarticular injection rate was 100% (45 of 45). The average arthrography time was 14 minutes (range, 6–27 minutes; 12 minutes [range, 6–25 minutes] for operator A and 16 minutes [range, 6–27 min] for operator B). Operator differences were not significant with regard to needle adjustment rate (P = .08), target error (P = .07), intraarticular injection rate (P > .99), and arthrography time (P = .22). Conclusion: Image overlay technology provides accurate and efficient MR guidance for successful shoulder and hip arthrography in human cadavers. © RSNA, 2012 Supplemental material: http://radiology.rsna.org/lookup/suppl/doi:10.1148/radiol.12112640/-/DC1 PMID:22843764

Evaluation of iron aluminide weld overlays for erosion - corrosion resistant boiler tube coatings in low NO{sub x} boilers

DOE Office of Scientific and Technical Information (OSTI.GOV)

DuPont, J.N.; Banovic, S.W.; Marder, A.R.

1996-08-01

Low NOx burners are being installed in many fossil fired power plants in order to comply with new Clean Air Regulations. Due to the operating characteristics of these burners, boiler tube sulfidation corrosion is often enhanced and premature tube failures can occur. Failures due to oxidation and solid particle erosion are also a concern. A program was initiated in early 1996 to evaluate the use of iron aluminide weld overlays for erosion/corrosion protection of boiler tubes in Low NOx boilers. Composite iron/aluminum wires will be used with the Gas Metal Arc Welding (GMAW) process to prepare overlays on boiler tubesmore » steels with aluminum contents from 8 to 16wt%. The weldability of the composite wires will be evaluated as a function of chemical composition and welding parameters. The effect of overlay composition on corrosion (oxidation and sulfidation) and solid particle erosion will also be evaluated. The laboratory studies will be complemented by field exposures of both iron aluminide weld overlays and co-extruded tubing under actual boiler conditions.« less

Comparing the capitalisation benefits of light-rail transit and overlay zoning for single-family houses and condos by neighbourhood type in metropolitan Phoenix, Arizona.

PubMed

Atkinson-Palombo, Carol

2010-01-01

Light rail transit (LRT) is increasingly accompanied by overlay zoning which specifies the density and type of future development to encourage landscapes conducive to transit use. Neighbourhood type (based on land use mix) is used to partition data and investigate how pre-existing land use, treatment with a park-and-ride (PAR) versus walk-and-ride (WAR) station and overlay zoning interrelate. Hedonic models estimate capitalisation effects of LRT-related accessibility and overlay zoning on single-family houses and condos in different neighbourhoods for the system in metropolitan Phoenix, Arizona. Impacts differ by housing and neighbourhood type. Amenity-dominated mixed-use neighbourhoods-predominantly WAR communities-experience premiums of 6 per cent for single-family houses and over 20 per cent for condos, the latter boosted an additional 37 per cent by overlay zoning. Residential neighbourhoods-predominantly PAR communities-experience no capitalisation benefits for single-family houses and a discount for condos. The results suggest that land use mix is an important variable to select comparable neighbourhoods.

Evaluation and comparison of ERTS measurements of major crops and soil associations for selected sites in the central United States

NASA Technical Reports Server (NTRS)

Baumgardner, M. F. (Principal Investigator)

1973-01-01

The author has identified the following significant results. The most significant result was the use of the temporal overlay technique where the computer was used to overlay ERTS-1 data from three different dates (9 Oct., 14 Nov., 2 Dec.). The registration of MSS digital data from different dates was estimated to be accurate within one half resolution element. The temporal overlay capability provides a significant advance in machine-processing of MSS data. It is no longer essential to go through the tedious exercise of locating ground observation sites on the digital data from each ERTS-1 overpass. Once the address of a ground observation site has been located on a digital tape from any ERTS-1 overpass, the overlay technique can be used to locate the same address on a digital tape of MSS data from any other ERTS-1 pass over the same area. The temporal overlay technique also adds a valuable dimension for identifying and mapping changes in vegetation, water, and other dynamic surface features.

Occlusal force discrimination by denture patients.

PubMed

Pacer, R J; Bowman, D C

1975-06-01

A study was conducted on subjects with conventional dentures and with overlay dentures to compare their abilities to discriminate between occlusal forces. Perpendicular forces were applied to the dynamic center of the occlusal table of the mandibular denture. Each subject's ability to distinguish differences in values of force was observed and recorded. All subjects with dentures showed sensory threshold values close to those reported for natural teeth. A graphic plotting showed that the responses of subjects with overlay-type dentures were more closely correlated with the psychophysical law as expressed by Stevens as a power function. Since this phenomenon holds true for natural teeth, the overlay denture more closely resembles natural teeth in this type of sensory function than does the conventional denture. In addition to recognized advantages, such as preservation of the ridge and improved retention and stability, the overlay denture provides more typical sensory function than is provided by the conventional denture. This advantage should further motivate dentists and patients to consider the retention and utilization of at least two suitable teeth in an overlay-type denture service.

INSPECTION TECHNIQUES FOR THE FABRICATION OF GEOMEMBRANE FIELD SEAMS

EPA Science Inventory

Geomembranes employed to overlay the excavation for landfills must be seamed together at the site of the landfill. o ensure the integrity of the containment system of the landfill, these sheets or blankets must be carefully seamed. he methods in present, common use are extrusion ...

Assessing techniques and performance of thin OGFC/PEM overlay on micro-milled surface : final report.

DOT National Transportation Integrated Search

2014-08-01

The practice of placing an open-graded friction course (OGFC) or a porous European mix (PEM) : directly on top of a conventional milled surface has rarely been done in Georgia due to concerns that this : rehabilitation method could potentially cause ...

An Evaluation of Methods for Encoding Multiple, 2D Spatial Data

DTIC Science & Technology

2011-01-01

using ellipsoid glyphs and brush strokes. They showed significant differences between healthy and unhealthy spinal cords in mice . The glyphs were...researcher must take care when choosing the color set. Also, the technique monopolizes the color attribute, making it difficult to overlay additional

Atomic Beam Scattering Methods to Study Overlayer Structures and H-Surface Interaction Relevant to Astrophysics

NASA Astrophysics Data System (ADS)

Lin, Jingsu

In this thesis we present results of experimental methods for studying surface structures of ultra-thin films and describe a new apparatus to study the recombination of atomic hydrogen on well characterized low temperature surface using atomic and molecular beam methods. We have used atomic beam scattering (ABS) to characterize the growth of mercury and lead overlayers on Cu(001) surface. The structures of ordered phases have been identified using ABS and low-energy electron diffraction (LEED). A model to analyze diffraction data from these phases is presented. The new apparatus we are going to describe includes a high performance atomic hydrogen source using radio-frequency (RF) dissociation. The dissociation efficiency can be as high as 90% in the optimized pressure range. An atomic hydrogen beam line has been added to our ultra-high vacuum (UHV) scattering apparatus. We have also designed and constructed a low temperature sample manipulator for experiments at liquid helium temperatures. The manipulator has one degree of freedom of rotation and the capability of heating the sample to 700K and cooling down to 12K. The first sample studied was a single graphite surface. We have used a He beam to characterize the sample surface and to monitor deposition of H on the sample surface in real time. A series of "adsorption curves" have been obtained at different temperature and doses. We found that at temperatures below 16K, both H and H_2 have formed a partial layer on the surface. From adsorption curve, we deduce that the initial sticking coefficient for H is about 0.06 when surface at 16K. When the H beam is interrupted, the He specularly reflected beam recovers partially, indicating that hydrogen atoms desorb, while others remain on the surface. The residual coverage of H is estimated to be about 2% of a monolayer.

Characterizing the Global Impact of P2P Overlays on the AS-Level Underlay

NASA Astrophysics Data System (ADS)

Rasti, Amir Hassan; Rejaie, Reza; Willinger, Walter

This paper examines the problem of characterizing and assessing the global impact of the load imposed by a Peer-to-Peer (P2P) overlay on the AS-level underlay. In particular, we capture Gnutella snapshots for four consecutive years, obtain the corresponding AS-level topology snapshots of the Internet and infer the AS-paths associated with each overlay connection. Assuming a simple model of overlay traffic, we analyze the observed load imposed by these Gnutella snapshots on the AS-level underlay using metrics that characterize the load seen on individual AS-paths and by the transit ASes, illustrate the churn among the top transit ASes during this 4-year period, and describe the propagation of traffic within the AS-level hierarchy.

Roll Casting of Aluminum Alloy Clad Strip

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nakamura, R.; Tsuge, H.; Haga, T.

2011-01-17

Casting of aluminum alloy three layers of clad strip was tried using the two sets of twin roll casters, and effects of the casting parameters on the cladding conditions were investigated. One twin roll caster was mounted on the other twin roll caster. Base strip was 8079 aluminum alloy and overlay strips were 6022 aluminum alloy. Effects of roll-load of upper and lower casters and melt temperature of the lower caster were investigated. When the roll-load of the upper and lower caster was large enough, the overlay strip could be solidified and be connected. The overlay strip could be connectedmore » when the melt of the overlay strip cast by the lower caster was low enough. Sound three layers of clad strip could be cast by proper conditions.« less

Accounting for nanometer-thick adventitious carbon contamination in X-ray absorption spectra of carbon-based materials.

PubMed

Mangolini, Filippo; McClimon, J Brandon; Rose, Franck; Carpick, Robert W

2014-12-16

Near-edge X-ray absorption fine structure (NEXAFS) spectroscopy is a powerful technique for characterizing the composition and bonding state of nanoscale materials and the top few nanometers of bulk and thin film specimens. When coupled with imaging methods like photoemission electron microscopy, it enables chemical imaging of materials with nanometer-scale lateral spatial resolution. However, analysis of NEXAFS spectra is often performed under the assumption of structural and compositional homogeneity within the nanometer-scale depth probed by this technique. This assumption can introduce large errors when analyzing the vast majority of solid surfaces due to the presence of complex surface and near-surface structures such as oxides and contamination layers. An analytical methodology is presented for removing the contribution of these nanoscale overlayers from NEXAFS spectra of two-layered systems to provide a corrected photoabsorption spectrum of the substrate. This method relies on the subtraction of the NEXAFS spectrum of the overlayer adsorbed on a reference surface from the spectrum of the two-layer system under investigation, where the thickness of the overlayer is independently determined by X-ray photoelectron spectroscopy (XPS). This approach is applied to NEXAFS data acquired for one of the most challenging cases: air-exposed hard carbon-based materials with adventitious carbon contamination from ambient exposure. The contribution of the adventitious carbon was removed from the as-acquired spectra of ultrananocrystalline diamond (UNCD) and hydrogenated amorphous carbon (a-C:H) to determine the intrinsic photoabsorption NEXAFS spectra of these materials. The method alters the calculated fraction of sp(2)-hybridized carbon from 5 to 20% and reveals that the adventitious contamination can be described as a layer containing carbon and oxygen ([O]/[C] = 0.11 ± 0.02) with a thickness of 0.6 ± 0.2 nm and a fraction of sp(2)-bonded carbon of 0.19 ± 0.03. This method can be generally applied to the characterization of surfaces and interfaces in several research fields and technological applications.

Integrated scatterometry for tight overlay and CD control to enable 20-nm node wafer manufacturing.

NASA Astrophysics Data System (ADS)

Benschop, Jos; Engelen, Andre; Cramer, Hugo; Kubis, Michael; Hinnen, Paul; van der Laan, Hans; Bhattacharyya, Kaustuve; Mulkens, Jan

2013-04-01

The overlay, CDU and focus requirements for the 20nm node can only be met using a holistic lithography approach whereby full use is made of high-order, field-by-field, scanner correction capabilities. An essential element in this approach is a fast, precise and accurate in-line metrology sensor, capable to measure on product. The capabilities of the metrology sensor as well as the impact on overlay, CD and focus will be shared in this paper.

On-product overlay enhancement using advanced litho-cluster control based on integrated metrology, ultra-small DBO targets and novel corrections

NASA Astrophysics Data System (ADS)

Bhattacharyya, Kaustuve; Ke, Chih-Ming; Huang, Guo-Tsai; Chen, Kai-Hsiung; Smilde, Henk-Jan H.; Fuchs, Andreas; Jak, Martin; van Schijndel, Mark; Bozkurt, Murat; van der Schaar, Maurits; Meyer, Steffen; Un, Miranda; Morgan, Stephen; Wu, Jon; Tsai, Vincent; Liang, Frida; den Boef, Arie; ten Berge, Peter; Kubis, Michael; Wang, Cathy; Fouquet, Christophe; Terng, L. G.; Hwang, David; Cheng, Kevin; Gau, TS; Ku, Y. C.

2013-04-01

Aggressive on-product overlay requirements in advanced nodes are setting a superior challenge for the semiconductor industry. This forces the industry to look beyond the traditional way-of-working and invest in several new technologies. Integrated metrology2, in-chip overlay control, advanced sampling and process correction-mechanism (using the highest order of correction possible with scanner interface today), are a few of such technologies considered in this publication.

In-situ formation of multiphase air plasma sprayed barrier coatings for turbine components

DOEpatents

Subramanian, Ramesh

2001-01-01

A turbine component (10), such as a turbine blade, is provided which is made of a metal alloy (22) and a base, planar-grained thermal barrier layer (28) applied by air plasma spraying on the alloy surface, where a heat resistant ceramic oxide overlay material (32') covers the bottom thermal barrier coating (28), and the overlay material is the reaction product of the precursor ceramic oxide overlay material (32) and the base thermal barrier coating material (28).

Task report #2.2, developing very thin overlays with locally available aggregates for each district : TxDOT project 9-1529, low cost safety solutions, pavement preservation and maintenance practices for rural highways.

DOT National Transportation Integrated Search

2013-04-01

The objective of this subtask was to generate crack resistant hot mix designs which could be placed very thin using locally available materials for each of the West Texas Districts wanting to participate in this study. Crack Attenuating Mixes (CAMs) ...

Spatially Locating FIA Plots from Pixel Values

Treesearch

Greg C. Liknes; Geoffrey R. Holden; Mark D. Nelson; Ronald E. McRoberts

2005-01-01

The USDA Forest Service Forest Inventory and Analysis (FIA) program is required to ensure the confidentiality of the geographic locations of plots. To accommodate user requests for data without releasing actual plot coordinates, FIA creates overlays of plot locations on various geospatial data, including satellite imagery. Methods for reporting pixel values associated...

Thin Bonded Concrete Overlay and Bonding Agents

DOT National Transportation Integrated Search

1996-06-01

This report presents the construction procedures and initial performance evaluation of a four-inch Bonded Concrete Overlay placed on Interstate 80 near Moline, Illinois. Preconstruction testing consisted of Falling Weight Deflectometer, permeability ...

Residual stress determination in an overlay dissimilar welded pipe by neutron diffraction

DOE Office of Scientific and Technical Information (OSTI.GOV)

Woo, Wan Chuck; Em, Vyacheslav; Hubbard, Camden R

2011-01-01

Residual stresses were determined through the thickness of a dissimilar weld overlay pipe using neutron diffraction. The specimen has a complex joining structure consisting of a ferritic steel (SA508), austenitic steel (F316L), Ni-based consumable (Alloy 182), and overlay of Ni-base superalloy (Alloy 52M). It simulates pressurized nozzle components, which have been a critical issue under the severe crack condition of nuclear power reactors. Two neutron diffractometers with different spatial resolutions have been utilized on the identical specimen for comparison. The macroscopic 'stress-free' lattice spacing (d{sub o}) was also obtained from both using a 2-mm width comb-like coupon. The results showmore » significant changes in residual stresses from tension (300-400 MPa) to compression (-600 MPa) through the thickness of the dissimilar weld overlay pipe specimen.« less

High-volume manufacturing device overlay process control

NASA Astrophysics Data System (ADS)

Lee, Honggoo; Han, Sangjun; Woo, Jaeson; Lee, DongYoung; Song, ChangRock; Heo, Hoyoung; Brinster, Irina; Choi, DongSub; Robinson, John C.

2017-03-01

Overlay control based on DI metrology of optical targets has been the primary basis for run-to-run process control for many years. In previous work we described a scenario where optical overlay metrology is performed on metrology targets on a high frequency basis including every lot (or most lots) at DI. SEM based FI metrology is performed ondevice in-die as-etched on an infrequent basis. Hybrid control schemes of this type have been in use for many process nodes. What is new is the relative size of the NZO as compared to the overlay spec, and the need to find more comprehensive solutions to characterize and control the size and variability of NZO at the 1x nm node: sampling, modeling, temporal frequency and control aspects, as well as trade-offs between SEM throughput and accuracy.

Transmission electron microscope cells for use with liquid samples

DOEpatents

Khalid, Waqas; Alivisatos, Paul A.; Zettl, Alexander K.

2016-08-09

This disclosure provides systems, methods, and devices related to transmission electron microscopy cells for use with liquids. In one aspect a device includes a substrate, a first graphene layer, and a second graphene layer. The substrate has a first surface and a second surface. The first surface defines a first channel, a second channel, and an outlet channel. The first channel and the second channel are joined to the outlet channel. The outlet channel defines a viewport region forming a though hole in the substrate. The first graphene layer overlays the first surface of the substrate, including an interior area of the first channel, the second channel, and the outlet channel. The second graphene layer overlays the first surface of the substrate, including open regions defined by the first channel, the second channel, and the outlet channel.

RHEED and EELS study of Pd/Al bimetallic thin film growth on different α-Al 2O 3 substrates

NASA Astrophysics Data System (ADS)

Moroz, V.; Rajs, K.; Mašek, K.

2002-06-01

Pd/Al bimetallic thin films were grown by molecular beam epitaxy on single-crystalline α-Al 2O 3(0 0 0 1) and (1 1 2¯ 0) surfaces. Substrate and deposit crystallographic structures and evolution of deposit lattice parameter during the growth were studied by reflection high-energy electron diffraction. The electron energy loss spectroscopy was used as an auxiliary method for chemical analysis. The bimetallic films were prepared by successive deposition of both Pd and Al metals. The structure of Pd and Al deposits in early stages of the growth and its dependence on the preparation conditions were studied. Two phases of Pd clusters covered by Al overlayer have been found. The formation of Al overlayer strongly influenced the lattice parameter of Pd clusters.

Interband Transitions

NASA Astrophysics Data System (ADS)

Varma, Shikha

We have studied thin (1-7 monolayer) overlayers of Hg on Ag(100) and Cu(100) using angle-resolved photoemission and low energy electron diffraction. We have investigated the electronic states of well ordered, disordered and the liquid overlayers of mercury. We show that the electronic structure of the well ordered overlayers is very different than that of the disordered and the liquid overlayers. The well ordered overlayers of Hg on Ag(100) exhibit a new electronic state which is absent for the disordered overlayers of mercury as well as for gaseous mercury. We will argue that this new Hg state is a result of the interaction among the Hg-Hg atoms, when adsorbed on Ag(100). The strain among adlayer atoms also plays a crucial role in the development of the new electronic state. We have used the synchrotron radiation to study the partial cross-section and the branching ratio of the 5d electronic state of Hg. We have measured the partial cross-section and branching ratio of the well-ordered, disordered and liquid overlayers of mercury on Ag(100) and Cu(100). We have observed resonances in the photoemission intensities of the mercury 5d orbitals for thin films of mercury for incident photon energies near the 5p _{3/2}, 4f_{7/2 } and 4f_{5/2} thresholds. The results indicate that interband transitions from the 5p and 4f levels to the 5d orbitals can occur for a thin overlayer of mercury, as a result of final state 5f contributions, though such interband transitions are forbidden for the free isolated Hg atom. These resonances are attributed to the formation of a solid state band structure incorporating new itinerant mercury electronic state. These resonances are absent when the mercury film is disordered or melted. We have measured the branching ratio of the 5d orbital for thin mercury overlayers in the photon energy range between 26 to 105 eV. The branching ratios deviate from the nonrelativistic statistical value of 1.5, reaching values of 8.0. These results indicate the importance of long range crystallographic structure and the effect of many -electron interactions in a thin film of mercury. We have also studied the intra molecular excitations in Br_2 and I_2 molecules using electron energy loss studies. These excitations give the information about the electronic structure of the molecule. From these studies we have identified the separation between the occupied and unoccupied orbitals of adsorbed halogen molecules on Fe(100).

Large-Scale Overlays and Trends: Visually Mining, Panning and Zooming the Observable Universe.

PubMed

Luciani, Timothy Basil; Cherinka, Brian; Oliphant, Daniel; Myers, Sean; Wood-Vasey, W Michael; Labrinidis, Alexandros; Marai, G Elisabeta

2014-07-01

We introduce a web-based computing infrastructure to assist the visual integration, mining and interactive navigation of large-scale astronomy observations. Following an analysis of the application domain, we design a client-server architecture to fetch distributed image data and to partition local data into a spatial index structure that allows prefix-matching of spatial objects. In conjunction with hardware-accelerated pixel-based overlays and an online cross-registration pipeline, this approach allows the fetching, displaying, panning and zooming of gigabit panoramas of the sky in real time. To further facilitate the integration and mining of spatial and non-spatial data, we introduce interactive trend images-compact visual representations for identifying outlier objects and for studying trends within large collections of spatial objects of a given class. In a demonstration, images from three sky surveys (SDSS, FIRST and simulated LSST results) are cross-registered and integrated as overlays, allowing cross-spectrum analysis of astronomy observations. Trend images are interactively generated from catalog data and used to visually mine astronomy observations of similar type. The front-end of the infrastructure uses the web technologies WebGL and HTML5 to enable cross-platform, web-based functionality. Our approach attains interactive rendering framerates; its power and flexibility enables it to serve the needs of the astronomy community. Evaluation on three case studies, as well as feedback from domain experts emphasize the benefits of this visual approach to the observational astronomy field; and its potential benefits to large scale geospatial visualization in general.

An MR-based Model for Cardio-Respiratory Motion Compensation of Overlays in X-Ray Fluoroscopy

PubMed Central

Fischer, Peter; Faranesh, Anthony; Pohl, Thomas; Maier, Andreas; Rogers, Toby; Ratnayaka, Kanishka; Lederman, Robert; Hornegger, Joachim

2017-01-01

In X-ray fluoroscopy, static overlays are used to visualize soft tissue. We propose a system for cardiac and respiratory motion compensation of these overlays. It consists of a 3-D motion model created from real-time MR imaging. Multiple sagittal slices are acquired and retrospectively stacked to consistent 3-D volumes. Slice stacking considers cardiac information derived from the ECG and respiratory information extracted from the images. Additionally, temporal smoothness of the stacking is enhanced. Motion is estimated from the MR volumes using deformable 3-D/3-D registration. The motion model itself is a linear direct correspondence model using the same surrogate signals as slice stacking. In X-ray fluoroscopy, only the surrogate signals need to be extracted to apply the motion model and animate the overlay in real time. For evaluation, points are manually annotated in oblique MR slices and in contrast-enhanced X-ray images. The 2-D Euclidean distance of these points is reduced from 3.85 mm to 2.75 mm in MR and from 3.0 mm to 1.8 mm in X-ray compared to the static baseline. Furthermore, the motion-compensated overlays are shown qualitatively as images and videos. PMID:28692969

"Performance Of A Wafer Stepper With Automatic Intra-Die Registration Correction."

NASA Astrophysics Data System (ADS)

van den Brink, M. A.; Wittekoek, S.; Linders, H. F. D.; van Hout, F. J.; George, R. A.

1987-01-01

An evaluation of a wafer stepper with the new improved Philips/ASM-L phase grating alignment system is reported. It is shown that an accurate alignment system needs an accurate X-Y-0 wafer stage and an accurate reticle Z stage to realize optimum overlay accuracy. This follows from a discussion of the overlay budget and an alignment procedure model. The accurate wafer stage permits high overlay accuracy using global alignment only, thus eliminating the throughput penalty of align-by-field schemes. The accurate reticle Z stage enables an intra-die magnification control with respect to the wafer scale. Various overlay data are reported, which have been measured with the automatic metrology program of the stepper. It is demonstrated that the new dual alignment system (with the external spatial filter) has improved the ability to align to weakly reflecting layers. The results are supported by a Fourier analysis of the alignment signal. Resolution data are given for the PAS 2500 projection lenses, which show that the high overlay accuracy of the system is properly matched with submicron linewidth control. The results of a recently introduced 20mm i-line lens with a numerical aperture of 0.4 (Zeiss 10-78-58) are included.

Optical resonance analysis of reflected long period fiber gratings with metal film overlay

NASA Astrophysics Data System (ADS)

Zhang, Guiju; Cao, Bing; Wang, Chinua; Zhao, Minfu

2008-11-01

We present the experimental results of a novel single-ended reflecting surface plasma resonance (SPR) based long period fiber grating (LPFG) sensor. A long period fiber grating sensing device is properly designed and fabricated with a pulsed CO2 laser writing system. Different nm-thick thin metal films are deposited on the fiber cladding and the fiber end facet for the excitation of surface plasma waves (SPWs) and the reflection of the transmission spectrum of the LPFG with doubled interaction between metal-dielectric interfaces of the fiber to enhance the SPW of the all-fiber SPR-LPFG sensing system. Different thin metal films with different thicknesses are investigated. The effect of the excited SPW transmission along the fiber cladding-metal interface with silver and aluminum films is observed. It is found that different thicknesses of the metal overlay show different resonant behaviors in terms of resonance peak situation, bandwidth and energy loss. Within a certain range, thinner metal film shows narrower bandwidth and deeper peak loss.

The future of EUV lithography: enabling Moore's Law in the next decade

NASA Astrophysics Data System (ADS)

Pirati, Alberto; van Schoot, Jan; Troost, Kars; van Ballegoij, Rob; Krabbendam, Peter; Stoeldraijer, Judon; Loopstra, Erik; Benschop, Jos; Finders, Jo; Meiling, Hans; van Setten, Eelco; Mika, Niclas; Dredonx, Jeannot; Stamm, Uwe; Kneer, Bernhard; Thuering, Bernd; Kaiser, Winfried; Heil, Tilmann; Migura, Sascha

2017-03-01

While EUV systems equipped with a 0.33 Numerical Aperture lenses are readying to start volume manufacturing, ASML and Zeiss are ramping up their development activities on a EUV exposure tool with Numerical Aperture greater than 0.5. The purpose of this scanner, targeting a resolution of 8nm, is to extend Moore's law throughout the next decade. A novel, anamorphic lens design, has been developed to provide the required Numerical Aperture; this lens will be paired with new, faster stages and more accurate sensors enabling Moore's law economical requirements, as well as the tight focus and overlay control needed for future process nodes. The tighter focus and overlay control budgets, as well as the anamorphic optics, will drive innovations in the imaging and OPC modelling, and possibly in the metrology concepts. Furthermore, advances in resist and mask technology will be required to image lithography features with less than 10nm resolution. This paper presents an overview of the key technology innovations and infrastructure requirements for the next generation EUV systems.

Optical Coating for Improvement in Thermal Radiative Properties of Cu (In, Ga) Se2 Thin Film Solar Cells for Space Applications

NASA Astrophysics Data System (ADS)

Shimazaki, Kazunori; Kawakita, Shirou; Imaizumi, Mitsuru; Kuwajima, Saburou; Sakurai, Keiichiro; Matsubara, Koji; Niki, Sigeru

2005-05-01

Optical coating on Cu(In, Ga)Se2 thin film solar cells, which have high radiation tolerance, is investigated in order to improve their radiative properties for thermal balance in space. Due to low thermal emissivity, the temperature of the CIGS solar cell is expected to exceed the allowable limit if no coating is applied. Evaporated single-layer coating of silicon dioxide and additional over-layer coatings on the CIGS solar cells increase the emissivity from 0.18 to 0.75. The coating with the over-layer coatings realizes higher emissivity with less thickness than that of the single SiO2 coating. In addition, optical coatings reflecting UV rays and infrared radiation are designed and evaporated on the cells to control solar input. The developed optical coatings could give the CIGS solar cells appropriate thermal radiative properties for space applications without any degradations of the cell performance.

Latex-modified concrete overlay containing Type K cement.

DOT National Transportation Integrated Search

2005-01-01

Hydraulic cement concrete overlays are usually placed on bridges to reduce the infiltration of water and chloride ions and to improve skid resistance, ride quality, and surface appearance. Constructed in accordance with prescription specifications, s...

Utilizing Lab Tests to Predict Asphalt Concrete Overlay Performance

DOT National Transportation Integrated Search

2017-12-01

A series of five experimental projects and three demonstration projects were constructed to better understand the performance of pavement overlays using various levels of asphalt binder replacement (ABR) from reclaimed asphalt pavement (RAP), recycle...

Evaluation of E-Krete for rut filling.

DOT National Transportation Integrated Search

2003-03-01

Wheel path rutting in asphalt pavements presents a serious problem for highway agencies : worldwide. There are several ways to rehabilitate rutted asphalt pavements, including milling by : itself, milling and overlay, overlay without milling, and rut...

Effectiveness of two reflection crack attenuation techniques.

DOT National Transportation Integrated Search

2015-09-01

Asphalt overlays are one of the most common tools for rehabilitating existing asphalt and concrete pavements. : However, the performance of new overlays is often jeopardized by the cracking distress in the existing : pavement. This existing cracking ...

Measuring, Achieving, And Promoting Smoothness Of Virginia's Asphalt Overlays

DOT National Transportation Integrated Search

1999-04-01

This study was initiated with the goal of identifying the predominant factors affecting the achievable smoothness of asphalt overlays. In addition, the researcher chronicles the evolution of Virginia's innovative special provision for smoothness, whi...

Layout decomposition of self-aligned double patterning for 2D random logic patterning

NASA Astrophysics Data System (ADS)

Ban, Yongchan; Miloslavsky, Alex; Lucas, Kevin; Choi, Soo-Han; Park, Chul-Hong; Pan, David Z.

2011-04-01

Self-aligned double pattering (SADP) has been adapted as a promising solution for sub-30nm technology nodes due to its lower overlay problem and better process tolerance. SADP is in production use for 1D dense patterns with good pitch control such as NAND Flash memory applications, but it is still challenging to apply SADP to 2D random logic patterns. The favored type of SADP for complex logic interconnects is a two mask approach using a core mask and a trim mask. In this paper, we first describe layout decomposition methods of spacer-type double patterning lithography, then report a type of SADP compliant layouts, and finally report SADP applications on Samsung 22nm SRAM layout. For SADP decomposition, we propose several SADP-aware layout coloring algorithms and a method of generating lithography-friendly core mask patterns. Experimental results on 22nm node designs show that our proposed layout decomposition for SADP effectively decomposes any given layouts.

Engineering fabrics in transportation construction

NASA Astrophysics Data System (ADS)

Herman, S. C.

1983-11-01

The following areas are discussed: treatments for reduction of reflective cracking of asphalt overlays on jointed-concrete pavements in Georgia; laboratory testing of fabric interlayers for asphalt concrete paving: interim report; reflection cracking models: review and laboratory evaluation of engineering fabrics; optimum-depth method for design of fabric-reinforced unsurfaced roads; dynamic test to predict field behavior of filter fabrics used in pavement subdrains; mechanism of geotextile performance in soil-fabric systems for drainage and erosion control; permeability tests of selected filter fabrics for use with a loess-derived alluvium; geotextile filter criteria; use of fabrics for improving the placement of till on peat foundation; geotextile earth-reinforced retaining wall tests: Glenwood Canyon, Colorado; New York State Department of Transportation's experience and guidelines for use of geotextiles; evaluation of two geotextile installations in excess of a decade old; and, long-term in situ properties of geotextiles.

The incorporation of plotting capability into the Unified Subsonic Supersonic Aerodynamic Analysis program, version B

NASA Technical Reports Server (NTRS)

Winter, O. A.

1980-01-01

The B01 version of the United Subsonic Supersonic Aerodynamic Analysis program is the result of numerous modifications and additions made to the B00 version. These modifications and additions affect the program input, its computational options, the code readability, and the overlay structure. The following are described: (1) the revised input; (2) the plotting overlay programs which were also modified, and their associated subroutines, (3) the auxillary files used by the program, the revised output data; and (4) the program overlay structure.

Design and performance of a production-worthy excimer-laser-based stepper

NASA Astrophysics Data System (ADS)

Unger, Robert; Sparkes, Christopher; Disessa, Peter A.; Elliott, David J.

1992-06-01

Excimer-laser-based steppers have matured to a production-worthy state. Widefield high-NA lenses have been developed and characterized for imaging down to 0.35 micron and below. Excimer lasers have attained practical levels of performance capability and stability, reliability, safety, and operating cost. Excimer stepper system integration and control issues such as focus, exposure, and overlay stability have been addressed. Enabling support technologies -- resist systems, resist processing, metrology and conventional mask making -- continue to progress and are becoming available. This paper discusses specific excimer stepper design challenges, and presents characterization data from several field installations of XLSTM deep-UV steppers configured with an advanced lens design.

A highly sensitive and versatile virus titration assay in the 96-well microplate format.

PubMed

Borisevich, V; Nistler, R; Hudman, D; Yamshchikov, G; Seregin, A; Yamshchikov, V

2008-02-01

This report describes a fast, reproducible, inexpensive and convenient assay system for virus titration in the 96-well format. The micromethod substantially increases assay throughput and improves the data reproducibility. A highly simplified variant of virus quantification is based on immunohistochemical detection of virus amplification foci obtained without use of agarose or semisolid overlays. It can be incorporated into several types of routine virological assays successfully replacing the laborious and time-consuming conventional methods based on plaque formation under semisolid overlays. The method does not depend on the development of CPE and can be accommodated to assay viruses with substantial differences in growth properties. The use of enhanced immunohistochemical detection enabled a five- to six-fold reduction of the total assay time. The micromethod was specifically developed to take advantage of multichannel pipettor use to simplify handling of a large number of samples. The method performs well with an inexpensive low-power binocular, thus offering a routine assay system usable outside of specialized laboratory setting, such as for testing of clinical or field samples. When used in focus reduction-neutralization tests (FRNT), the method accommodates very small volumes of immune serum, which is often a decisive factor in experiments involving small rodent models.

Does Gender Influence Colour Choice in the Treatment of Visual Stress?

PubMed

Conway, Miriam L; Evans, Bruce J W; Evans, Josephine C; Suttle, Catherine M

2016-01-01

Visual Stress (VS) is a condition in which words appear blurred, in motion, or otherwise distorted when reading. Some people diagnosed with VS find that viewing black text on white paper through coloured overlays or precision tinted lenses (PTLs) reduces symptoms attributed to VS. The aim of the present study is to determine whether the choice of colour of overlays or PTLs is influenced by a patient's gender. Records of all patients attending a VS assessment in two optometry practices between 2009 and 2014 were reviewed retrospectively. Patients who reported a significant and consistent reduction in symptoms with either overlay and or PTL were included in the analysis. Overlays and PTLs were categorized as stereotypical male, female or neutral colours based on gender preferences as described in the literature. Chi-square analysis was carried out to determine whether gender (across all ages or within age groups) was associated with overlay or PTL colour choice. 279 patients (133 males and 146 females, mean age 17 years) consistently showed a reduction in symptoms with an overlay and were included. Chi-square analysis revealed no significant association between the colour of overlay chosen and male or female gender (Chi-square 0.788, p = 0.674). 244 patients (120 males and 124 females, mean age 24.5 years) consistently showed a reduction in symptoms with PTLs and were included. Chi-square analysis revealed a significant association between stereotypical male/female/neutral colours of PTLs chosen and male/female gender (Chi-square 6.46, p = 0.040). More males preferred stereotypical male colour PTLs including blue and green while more females preferred stereotypical female colour PTLs including pink and purple. For some VS patients, the choice of PTL colour is influenced not only by the alleviation of symptoms but also by other non-visual factors such as gender.

A Quality Assurance Method that Utilizes 3D Dosimetry and Facilitates Clinical Interpretation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Oldham, Mark, E-mail: mark.oldham@duke.edu; Thomas, Andrew; O'Daniel, Jennifer

2012-10-01

Purpose: To demonstrate a new three-dimensional (3D) quality assurance (QA) method that provides comprehensive dosimetry verification and facilitates evaluation of the clinical significance of QA data acquired in a phantom. Also to apply the method to investigate the dosimetric efficacy of base-of-skull (BOS) intensity-modulated radiotherapy (IMRT) treatment. Methods and Materials: Two types of IMRT QA verification plans were created for 6 patients who received BOS IMRT. The first plan enabled conventional 2D planar IMRT QA using the Varian portal dosimetry system. The second plan enabled 3D verification using an anthropomorphic head phantom. In the latter, the 3D dose distribution wasmore » measured using the DLOS/Presage dosimetry system (DLOS = Duke Large-field-of-view Optical-CT System, Presage Heuris Pharma, Skillman, NJ), which yielded isotropic 2-mm data throughout the treated volume. In a novel step, measured 3D dose distributions were transformed back to the patient's CT to enable calculation of dose-volume histograms (DVH) and dose overlays. Measured and planned patient DVHs were compared to investigate clinical significance. Results: Close agreement between measured and calculated dose distributions was observed for all 6 cases. For gamma criteria of 3%, 2 mm, the mean passing rate for portal dosimetry was 96.8% (range, 92.0%-98.9%), compared to 94.9% (range, 90.1%-98.9%) for 3D. There was no clear correlation between 2D and 3D passing rates. Planned and measured dose distributions were evaluated on the patient's anatomy, using DVH and dose overlays. Minor deviations were detected, and the clinical significance of these are presented and discussed. Conclusions: Two advantages accrue to the methods presented here. First, treatment accuracy is evaluated throughout the whole treated volume, yielding comprehensive verification. Second, the clinical significance of any deviations can be assessed through the generation of DVH curves and dose overlays on the patient's anatomy. The latter step represents an important development that advances the clinical relevance of complex treatment QA.« less

Premixed polymer concrete overlays.

DOT National Transportation Integrated Search

1990-01-01

The results of a study undertaken to evaluate premixed polymer concrete overlays (PMPCO) over a 3-year period are presented. The PMPCO evaluated were constructed with polyester amide para resin and silica sand 1;. polyester styrene resin 1 and silica...

Polymer concrete overlay test program : interim report.

DOT National Transportation Integrated Search

1974-11-01

This report describes work done on various combinations of monomers and polymer concrete mixes and identifies the mixes showing the greatest potential for use in bridge deck overlays . Presented are test results showing physical properties of various...

Evaluation of a thin-bonded Portland cement concrete pavement overlay.

DOT National Transportation Integrated Search

1996-01-01

This report discusses the performance of the Virginia Department of Transportation's first modern rehabilitation project involving a thin-bonded portland cement concrete overlay of an existing jointed concrete pavement. The performance of the rigid o...

Research notes : geotextile fabrics under asphalt concrete overlays.

DOT National Transportation Integrated Search

1992-12-01

Last year, the City of Portland decided to place geotextile fabrics under asphalt concrete overlays for pavement reinforcement and crack retardation. The City expected the following benefits from using the fabrics: retardation of reflective cracks, r...

Measuring, achieving and promoting smoothness of Virginia's asphalt overlays.

DOT National Transportation Integrated Search

1999-01-01

This study was initiated with the goal of identifying the predominant factors affecting the achievable smoothness of asphalt overlays. In addition, it chronicles the evolution of Virginia's innovative special provision for smoothness, which was devel...

Stress absorbing membrane innerlayer : final report.

DOT National Transportation Integrated Search

1985-04-01

The westbound lanes of the South Baker Interchange-Encina Interchange Section of I-84 were overlayed in 1977. A stress absorbing membrane innerlayer (SAMI), was included in this overlay as an experimental feature. This report is the final evaluation ...

Performance specification for high performance concrete overlays on bridges.

DOT National Transportation Integrated Search

2004-01-01

Hydraulic cement concrete overlays are usually placed on bridges to reduce the infiltration of water and chloride ions and to improve skid resistance, ride quality, and surface appearance. Constructed in accordance with prescription specifications, s...

Overlay field application program, Pennsylvania US-119.

DOT National Transportation Integrated Search

2010-11-01

The Concrete Overly Filed Application program is administered by FHWA and the National Concrete Pavement Technology Center (CP Tech Center). The overall objective of this program is to increase the awareness and knowledge of concrete overlay applicat...

On the influence of latency estimation on dynamic group communication using overlays

NASA Astrophysics Data System (ADS)

Vik, Knut-Helge; Griwodz, Carsten; Halvorsen, Pål

2009-01-01

Distributed interactive applications tend to have stringent latency requirements and some may have high bandwidth demands. Many of them have also very dynamic user groups for which all-to-all communication is needed. In online multiplayer games, for example, such groups are determined through region-of-interest management in the application. We have investigated a variety of group management approaches for overlay networks in earlier work and shown that several useful tree heuristics exist. However, these heuristics require full knowledge of all overlay link latencies. Since this is not scalable, we investigate the effects that latency estimation techqniues have ton the quality of overlay tree constructions. We do this by evaluating one example of our group management approaches in Planetlab and examing how latency estimation techqniues influence their quality. Specifically, we investigate how two well-known latency estimation techniques, Vivaldi and Netvigator, affect the quality of tree building.

Single-layer graphdiyne-covered Pt(111) surface: improved catalysis confined under two-dimensional overlayer

NASA Astrophysics Data System (ADS)

Chen, Xi; Lin, Zheng-Zhe

2018-05-01

In recent years, two-dimensional confined catalysis, i.e., the enhanced catalytic reactions in confined space between metal surface and two-dimensional overlayer, makes a hit and opens up a new way to enhance the performance of catalysts. In this work, graphdiyne overlayer was proposed as a more excellent material than graphene or hexagonal boron nitride for two-dimensional confined catalysis on Pt(111) surface. Density functional theory calculations revealed the superiority of graphdiyne overlayer originates from the steric hindrance effect which increases the catalytic ability and lowers the reaction barriers. Moreover, with the big triangle holes as natural gas tunnels, graphdiyne possesses higher efficiency for the transit of gaseous reactants and products than graphene or hexagonal boron nitride. The results in this work would benefit future development of two-dimensional confined catalysis. [Figure not available: see fulltext.

On Adding Structure to Unstructured Overlay Networks

NASA Astrophysics Data System (ADS)

Leitão, João; Carvalho, Nuno A.; Pereira, José; Oliveira, Rui; Rodrigues, Luís

Unstructured peer-to-peer overlay networks are very resilient to churn and topology changes, while requiring little maintenance cost. Therefore, they are an infrastructure to build highly scalable large-scale services in dynamic networks. Typically, the overlay topology is defined by a peer sampling service that aims at maintaining, in each process, a random partial view of peers in the system. The resulting random unstructured topology is suboptimal when a specific performance metric is considered. On the other hand, structured approaches (for instance, a spanning tree) may optimize a given target performance metric but are highly fragile. In fact, the cost for maintaining structures with strong constraints may easily become prohibitive in highly dynamic networks. This chapter discusses different techniques that aim at combining the advantages of unstructured and structured networks. Namely we focus on two distinct approaches, one based on optimizing the overlay and another based on optimizing the gossip mechanism itself.

Evaluation of a novel ultra small target technology supporting on-product overlay measurements

NASA Astrophysics Data System (ADS)

Smilde, Henk-Jan H.; den Boef, Arie; Kubis, Michael; Jak, Martin; van Schijndel, Mark; Fuchs, Andreas; van der Schaar, Maurits; Meyer, Steffen; Morgan, Stephen; Wu, Jon; Tsai, Vincent; Wang, Cathy; Bhattacharyya, Kaustuve; Chen, Kai-Hsiung; Huang, Guo-Tsai; Ke, Chih-Ming; Huang, Jacky

2012-03-01

Reducing the size of metrology targets is essential for in-die overlay metrology in advanced semiconductor manufacturing. In this paper, μ-diffraction-based overlay (μDBO) measurements with a YieldStar metrology tool are presented for target-sizes down to 10 × 10 μm2. The μDBO technology enables selection of only the diffraction efficiency information from the grating by efficiently separating it from product structure reflections. Therefore, μDBO targets -even when located adjacent to product environment- give excellent correlation with 40 × 160 μm2 reference targets. Although significantly smaller than standard scribe-line targets, they can achieve total-measurement-uncertainty values of below 0.5 nm on a wide range of product layers. This shows that the new μDBO technique allows for accurate metrology on ultra small in-die targets, while retaining the excellent TMU performance of diffraction-based overlay metrology.

Study of behaviors of aluminum overlayers deposited on uranium via AES, EELS, and XPS

NASA Astrophysics Data System (ADS)

Liu, Kezhao; Luo, Lizhu; Zhou, Wei; Yang, Jiangrong; Xiao, Hong; Hong, Zhanglian; Yang, Hui

2013-04-01

Aluminum overlayers on uranium were prepared by sputtering at room temperature in an ultra-high vacuum chamber. The growth mode of aluminum overlayers and behaviors of the Al/U interface reaction were studied in situ by auger electron spectroscopy, electron energy loss spectroscopy, and X-ray photoelectron spectroscopy. The results suggested that the interdiffusion took place at the Al/U interface during the initial stage of deposition. The U4f spectra of the Al/U interface showed strong correlation satellites at binding energies of 380.4 and 392.7 eV and plasma loss features at 404.2 eV, respectively. The interactions between aluminum and uranium yielded the intermetallic compound of UAlx, inducing the shift to a low binding energy for Al2p peaks. The results indicated that aluminum overlayers were formed on the uranium by sputtering in an island growth mode.

Cooperative Resource Pricing in Service Overlay Networks for Mobile Agents

NASA Astrophysics Data System (ADS)

Nakano, Tadashi; Okaie, Yutaka

The success of peer-to-peer overlay networks depends on cooperation among participating peers. In this paper, we investigate the degree of cooperation among individual peers required to induce globally favorable properties in an overlay network. Specifically, we consider a resource pricing problem in a market-oriented overlay network where participating peers sell own resources (e.g., CPU cycles) to earn energy which represents some money or rewards in the network. In the resource pricing model presented in this paper, each peer sets the price for own resource based on the degree of cooperation; non-cooperative peers attempt to maximize their own energy gains, while cooperative peers maximize the sum of own and neighbors' energy gains. Simulation results are presented to demonstrate that the network topology is an important factor influencing the minimum degree of cooperation required to increase the network-wide global energy gain.

Maxillary overlay removable partial dentures for the restoration of worn teeth.

PubMed

Fonseca, Júlio; Nicolau, Pedro; Daher, Tony

2011-04-01

Prolonged tooth maintenance by a more aged population considerably increases the probability of dentists having to treat patients with high levels of tooth wear. Pathological tooth wear, caused primarily by parafunction, seems to be a growing problem that affects a large number of adult patients. The clinical report presents a case of a partially edentulous patient with an elevated degree of wear in the upper jaw caused by attrition and erosion, rehabilitated with a maxillary overlay removable partial denture (ORPD) consisting of a chrome-cobalt (Cr-Co) framework with anterior acrylic resin veneers, posterior cast overlays, and acrylic resin denture bases. Removable partial prosthesis is a treatment alternative when teeth are found to be severely worn or when the patient needs a simple and economical option. Because economics is a conditional factor of the treatment, the clinician should present different treatment alternatives to the patient, in which the overlay prosthesis can be considered.

Etude de L'interface Or/silicium Par Analyse de Surface et Microscopie Electronique

NASA Astrophysics Data System (ADS)

Lamontagne, Boris

In order to start with the cleanest c-Si surface achievable, two cleaning procedures have been used and compared: aqueous chemical cleaning with HF, and sputter cleaning followed by high temperature annealing; the former is found to be the most efficient of the two. We have observed the formation of Si-C bonds induced by energetic particles associated to sputtering and sputter deposition. One of the main objectives of this work was to compare the Au/Si interfaces obtained by e-beam evaporation and by sputter deposition; Ag/Si, Cu/Si and Al/Si interfaces have also been examined. X-ray photoelectron diffraction has allowed us to judge the quality of the substrate crystallinity under the metallic overlayer, a method which readily showed the amorphisation of the c-Si substrate induced by sputter deposition. Moreover, XPD has indicated the Au overlayer to be amorphous, while the Ag and Cu appear to grow heteroepitaxially on c-Si(100). A new XPS parameter has been developed to characterize the metal/Si interface state, in particular, broadening of the interface induced by the sputter deposition. For the case of evaporated layers, it indicates that Au/Si and Cu/Si interfaces are diffuse, while Ag/Si and Al/Si interfaces are abrupt. Atomic force microscopy has revealed that sputter deposition reduces the tendency to form metal islands, characteristic of some overlayer/substrate systems such as Ag/Si. Our experiments have illustrated the role of two "new" parameters which lead to better knowledge and control of the sputter deposition process, namely the ion masses and the sample position relative to that of the target position. In the scientific literature, the value of the critical thickness, d_{rm c} , for reaction between Au and Si is still a controversial issue, probably on account of calibration problems. By using newly observed XPS discontinuities, corresponding to the completion of the first and second Au monolayers, we have been able to resolve this problem, and thereby precisely evaluate the critical thickness, d_ {rm c} = 2 ML. We obtained various new information about the Au/Si interface using complementary methods (XPD, XPS, TEM, AFM, etc.) information from which we developed a new model of the Au/Si interface; this so called "cluster model" correlates the observed overlayer structural transition with the beginning of the reaction between Au and Si. It suggests that reconstruction of the overlayer at 2 ML thickness activates the reaction between Si and Au (Si-Si bonds disruption, followed by Si outdiffusion). This model seems to be the only one capable of explaining the difference in reactivity between Au/Si and Ag/Si interfaces. (Abstract shortened by UMI.).

Methods to characterize environmental settings of stream and groundwater sampling sites for National Water-Quality Assessment

USGS Publications Warehouse

Nakagaki, Naomi; Hitt, Kerie J.; Price, Curtis V.; Falcone, James A.

2012-01-01

Characterization of natural and anthropogenic features that define the environmental settings of sampling sites for streams and groundwater, including drainage basins and groundwater study areas, is an essential component of water-quality and ecological investigations being conducted as part of the U.S. Geological Survey's National Water-Quality Assessment program. Quantitative characterization of environmental settings, combined with physical, chemical, and biological data collected at sampling sites, contributes to understanding the status of, and influences on, water-quality and ecological conditions. To support studies for the National Water-Quality Assessment program, a geographic information system (GIS) was used to develop a standard set of methods to consistently characterize the sites, drainage basins, and groundwater study areas across the nation. This report describes three methods used for characterization-simple overlay, area-weighted areal interpolation, and land-cover-weighted areal interpolation-and their appropriate applications to geographic analyses that have different objectives and data constraints. In addition, this document records the GIS thematic datasets that are used for the Program's national design and data analyses.

Forest Resource Information System (FRIS)

NASA Technical Reports Server (NTRS)

1983-01-01

The technological and economical feasibility of using multispectral digital image data as acquired from the LANDSAT satellites in an ongoing operational forest information system was evaluated. Computer compatible multispectral scanner data secured from the LANDSAT satellites were demonstrated to be a significant contributor to ongoing information systems by providing the added dimensions of synoptic and repeat coverage of the Earth's surface. Major forest cover types of conifer, deciduous, mixed conifer-deciduous and non-forest, were classified well within the bounds of the statistical accuracy of the ground sample. Further, when overlayed with existing maps, the acreage of cover type retains a high level of positional integrity. Maps were digitized by a graphics design system, overlayed and registered onto LANDSAT imagery such that the map data with associated attributes were displayed on the image. Once classified, the analysis results were converted back to map form as a cover type of information. Existing tabular information as represented by inventory is registered geographically to the map base through a vendor provided data management system. The notion of a geographical reference base (map) providing the framework to which imagery and tabular data bases are registered and where each of the three functions of imagery, maps and inventory can be accessed singly or in combination is the very essence of the forest resource information system design.

Vacuum Gas Tungsten Arc Welding

NASA Technical Reports Server (NTRS)

Weeks, J. L.; Todd, D. T.; Wooten, J. R.

1997-01-01

A two-year program investigated vacuum gas tungsten arc welding (VGTAW) as a method to modify or improve the weldability of normally difficult-to-weld materials. After a vacuum chamber and GTAW power supply were modified, several difficult-to-weld materials were studied and key parameters developed. Finally, Incoloy 903 weld overlays were produced without microfissures.

Eukaryotic cell flattening

NASA Astrophysics Data System (ADS)

Bae, Albert; Westendorf, Christian; Erlenkamper, Christoph; Galland, Edouard; Franck, Carl; Bodenschatz, Eberhard; Beta, Carsten

2010-03-01

Eukaryotic cell flattening is valuable for improving microscopic observations, ranging from bright field to total internal reflection fluorescence microscopy. In this talk, we will discuss traditional overlay techniques, and more modern, microfluidic based flattening, which provides a greater level of control. We demonstrate these techniques on the social amoebae Dictyostelium discoideum, comparing the advantages and disadvantages of each method.

The use of natural teeth in overlay dentures.

PubMed

Frantz, W R

1975-08-01

A method has been described for the construction of tooth-supported dentures where the natural tooth was utilized and the acrylic resin for the denture base processed directly to the prepared cast. Based on the 112 dentures that were made, this technique is economical, provides support and stabilization, and has full patient acceptance.

RELATIONSHIPS BETWEEN JUVENILE WINTER FLOUNDER AND MULTIPLE-SCALE HABITAT VARIATION IN NARRAGANSETT BAY, RHODE ISLAND

EPA Science Inventory

A rapid random-sampling method was used to relate densities of juvenile winter flounder to multiple scales of habitat variation in Narragansett Bay and two nearby coastal lagoons in Rhode Island. We used a 1-m beam trawl with attached video camera, continuous GPS track overlay, ...

Enhancing the magnetic anisotropy energy by tuning the contact areas of Ag and Ni at the Ag/Ni interface.

PubMed

Chow, Yu-Ting; Jiang, Bin-Han; Chang, Cheng-Hsun-Tony; Tsay, Jyh-Shen

2018-01-17

Modifying the interfacial conditions of magnetic layers by capping with overlayers can efficiently enhance the magnetic functionality of a material. However, the mechanisms responsible for this are closely related to the crystalline structure, compositional combinations, and interfacial quality, and are generally complex. In this contribution, we explored the use of Ag ultrathin overlayers on annealed . A method for preparing magnetic layers with different levels of enhanced magnetic anisotropy energy was developed. The method essentially involves simply modifying the contact area of the metallic/magnetic interface. A rougher interface results in a larger contact area between the Ag and Ni layers, resulting in an increase in magnetic anisotropy energy. Moreover, post-annealing treatments led to the segregation of Ni atoms, thus making the enhancement in the coercive force even more efficient. A model permits an understanding of the contact area and a strategy for enhancing the magnetic anisotropy energy and the coercive force was developed. Our approaches and the developed model promise to be helpful in terms of developing potential applications of ultrathin magnetic layers in the area of spintronics.

Analytical treatment of the deformation behavior of EUVL masks during electrostatic chucking

NASA Astrophysics Data System (ADS)

Brandstetter, Gerd; Govindjee, Sanjay

2012-03-01

A new analytical approach is presented to predict mask deformation during electro-static chucking in next generation extreme-ultraviolet-lithography (EUVL). Given an arbitrary profile measurement of the mask and chuck non-flatness, this method has been developed as an alternative to time-consuming finite element simulations for overlay error correction algorithms. We consider the feature transfer of each harmonic component in the profile shapes via linear elasticity theory and demonstrate analytically how high spatial frequencies are filtered. The method is compared to presumably more accurate finite element simulations and has been tested successfully in an overlay error compensation experiment, where the residual error y-component could be reduced by a factor 2. As a side outcome, the formulation provides a tool to estimate the critical pin-size and -pitch such that the distortion on the mask front-side remains within given tolerances. We find for a numerical example that pin-pitches of less than 5 mm will result in a mask pattern-distortion of less than 1 nm if the chucking pressure is below 30 kPa.

Analytical treatment of the deformation behavior of extreme-ultraviolet-lithography masks during electrostatic chucking

NASA Astrophysics Data System (ADS)

Brandstetter, Gerd; Govindjee, Sanjay

2012-10-01

A new analytical approach is presented to predict mask deformation during electrostatic chucking in next-generation extreme-ultraviolet-lithography. Given an arbitrary profile measurement of the mask and chuck nonflatness, this method has been developed as an alternative to time-consuming finite element simulations for overlay error correction algorithms. We consider the feature transfer of each harmonic component in the profile shapes via linear elasticity theory and demonstrate analytically how high spatial frequencies are filtered. The method is compared to presumably more accurate finite element simulations and has been tested successfully in an overlay error compensation experiment, where the residual error y-component could be reduced by a factor of 2. As a side outcome, the formulation provides a tool to estimate the critical pin-size and -pitch such that the distortion on the mask front-side remains within given tolerances. We find for a numerical example that pin-pitches of less than 5 mm will result in a mask pattern distortion of less than 1 nm if the chucking pressure is below 30 kPa.

Implementing statistical analysis in multi-channel acoustic impact-echo testing of concrete bridge decks: Determining thresholds for delamination detection

NASA Astrophysics Data System (ADS)

Hendricks, Lorin; Spencer Guthrie, W.; Mazzeo, Brian

2018-04-01

An automated acoustic impact-echo testing device with seven channels has been developed for faster surveying of bridge decks. Due to potential variations in bridge deck overlay thickness, varying conditions between testing passes, and occasional imprecise equipment calibrations, a method that can account for variations in deck properties and testing conditions was necessary to correctly interpret the acoustic data. A new methodology involving statistical analyses was therefore developed. After acoustic impact-echo data are collected and analyzed, the results are normalized by the median for each channel, a Gaussian distribution is fit to the histogram of the data, and the Kullback-Leibler divergence test or Otsu's method is then used to determine the optimum threshold for differentiating between intact and delaminated concrete. The new methodology was successfully applied to individual channels of previously unusable acoustic impact-echo data obtained from a three-lane interstate bridge deck surfaced with a polymer overlay, and the resulting delamination map compared very favorably with the results of a manual deck sounding survey.

Longevity of highway pavements in Illinois : 2000 update

DOT National Transportation Integrated Search

2002-12-01

Results of the latest round of pavement longevity studies in Illinois provide updated performance data through 2000 for HMAC, JRCP, : and CRCP new construction as well as AC overlays (first, second, and third overlays) of these original pavements. Th...

Styrene-butadiene latex modifiers for bridge deck overlay concrete.

DOT National Transportation Integrated Search

1978-04-01

Styrene-butadiene (S/B) latex modified concrete overlays are being used to protect : new bridge decks from rapid deicer-borne chloride intrusion and also in bridge : deck rehabilitation efforts. The purposes of this research were to evaluate several ...

Polymer concrete overlay test program : users' manual.

DOT National Transportation Integrated Search

1977-12-01

The purpose of this manual is to provide the reader with sufficient information to successfully place a polyester styrene polymer concrete overlay on a bridge deck. Although the binder is a resin, no detailed knowledge of polymer chemistry is needed ...

Latex and microsilica modified concrete bridge deck overlays in Oregon : interim report.

DOT National Transportation Integrated Search

1994-08-01

This interim report presented information collected from 24 bridge deck overlays constructed in Oregon between 1989 and 1993. Decks were placed on a variety of existing structures using hydroblasting, milling and diamond grinding surface preparation....

Ultra-thin whitetopping for general aviation airports in New Mexico.

DOT National Transportation Integrated Search

2002-06-01

Whitetopping is a pavement rehabilitation construction practice where portland cement concrete (PCC) is placed over an existing asphalt concrete pavement as an overlay. Ultra-thin whitetopping (UTW) is generally a thin overlay with a thickness betwee...

Cracking and debonding of a thin fiber reinforced concrete overlay : research brief.

DOT National Transportation Integrated Search

2017-03-01

Experimental tests found that the tensile interfacial energy : increased with fiber-reinforcement. Also bond tests indicated : that interfacial fracture occurred through the overlay mixture and : was proportional to the number of fibers which interse...

Performance assessment of Wisconsin's whitetopping and ultra thin whitetopping projects.

DOT National Transportation Integrated Search

2010-03-01

Whitetopping overlay is a concrete overlay on the prepared existing hot mix asphalt (HMA) pavement to : improve both the structural and functional capability. Its a relatively new rehabilitation technology for : deteriorated HMA. If the slab thick...

Performance of bridge deck overlays in Virginia : phase 1 : state of overlays : final report

DOT National Transportation Integrated Search

2017-05-01

Maintaining the existing transportation infrastructure is a major concern of the Virginia Department of Transportation : (VDOT). The increased user travel costs, safety concerns, and financial burdens involved in replacing deteriorating decks are : r...

Evaluation of thin asphalt overlay practice preserving Nebraska's asphalt pavements.

DOT National Transportation Integrated Search

2015-06-01

This study examined the current thin asphalt overlay practices implemented in Nebraska. To that end, the mechanical : properties and performance characteristics of the two mixtures (i.e., SLX and SPH) were compared by carrying out : laboratory tests ...

Investigation of silica fume concrete bridge deck overlay failures.

DOT National Transportation Integrated Search

2016-02-23

Many of these microsilica-modified concrete or silica fume concrete (SFC) bridge deck overlays across the State of Wyoming are suffering from premature distress that includes random cracking, loss of bond and delaminations. To determine the most like...

Crack sealing before overlaying an asphalt concrete surface.

DOT National Transportation Integrated Search

1997-01-01

In an attempt to reduce reflective cracking on overlay projects a study was conducted that : consisted of sealing all transverse cracks greater than inch with hot crack sealers before the : project was resurfaced. The experiment will evaluate the ...

Evaluation of the Installation and Initial Condition of Rosphalt Overlays on Bridge Decks.

DOT National Transportation Integrated Search

2013-06-01

"Protection systems are placed on bridge decks to retard the intrusion of chlorides and moisture that can eventually cause : corrosion deterioration. The Virginia Department of Transportation typically uses hydraulic cement concrete (HCC) overlays of...

Bonded concrete overlay performance in Illinois

DOT National Transportation Integrated Search

2002-04-01

Two bonded concrete overlay rehabilitation projects were constructed in Illinois during the 1990's. The first project was constructed in 1994 and 1995 on Interstate 80, east of Moline. The second project was constructed in 1996 on Interstate 88 near ...

A method for predicting optimized processing parameters for surfacing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dupont, J.N.; Marder, A.R.

1994-12-31

Welding is used extensively for surfacing applications. To operate a surfacing process efficiently, the variables must be optimized to produce low levels of dilution with the substrate while maintaining high deposition rates. An equation for dilution in terms of the welding variables, thermal efficiency factors, and thermophysical properties of the overlay and substrate was developed by balancing energy and mass terms across the welding arc. To test the validity of the resultant dilution equation, the PAW, GTAW, GMAW, and SAW processes were used to deposit austenitic stainless steel onto carbon steel over a wide range of parameters. Arc efficiency measurementsmore » were conducted using a Seebeck arc welding calorimeter. Melting efficiency was determined based on knowledge of the arc efficiency. Dilution was determined for each set of processing parameters using a quantitative image analysis system. The pertinent equations indicate dilution is a function of arc power (corrected for arc efficiency), filler metal feed rate, melting efficiency, and thermophysical properties of the overlay and substrate. With the aid of the dilution equation, the effect of processing parameters on dilution is presented by a new processing diagram. A new method is proposed for determining dilution from welding variables. Dilution is shown to depend on the arc power, filler metal feed rate, arc and melting efficiency, and the thermophysical properties of the overlay and substrate. Calculated dilution levels were compared with measured values over a large range of processing parameters and good agreement was obtained. The results have been applied to generate a processing diagram which can be used to: (1) predict the maximum deposition rate for a given arc power while maintaining adequate fusion with the substrate, and (2) predict the resultant level of dilution with the substrate.« less

Three-Dimensional Path Planning Software-Assisted Transjugular Intrahepatic Portosystemic Shunt: A Technical Modification

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tsauo, Jiaywei, E-mail: 80732059@qq.com; Luo, Xuefeng, E-mail: luobo-913@126.com; Ye, Linchao, E-mail: linchao.ye@siemens.com

2015-06-15

PurposeThis study was designed to report our results with a modified technique of three-dimensional (3D) path planning software assisted transjugular intrahepatic portosystemic shunt (TIPS).Methods3D path planning software was recently developed to facilitate TIPS creation by using two carbon dioxide portograms acquired at least 20° apart to generate a 3D path for overlay needle guidance. However, one shortcoming is that puncturing along the overlay would be technically impossible if the angle of the liver access set and the angle of the 3D path are not the same. To solve this problem, a prototype 3D path planning software was fitted with a utility to calculate themore » angle of the 3D path. Using this, we modified the angle of the liver access set accordingly during the procedure in ten patients.ResultsFailure for technical reasons occurred in three patients (unsuccessful wedged hepatic venography in two cases, software technical failure in one case). The procedure was successful in the remaining seven patients, and only one needle pass was required to obtain portal vein access in each case. The course of puncture was comparable to the 3D path in all patients. No procedure-related complication occurred following the procedures.ConclusionsAdjusting the angle of the liver access set to match the angle of the 3D path determined by the software appears to be a favorable modification to the technique of 3D path planning software assisted TIPS.« less

Assessing groundwater vulnerability to agrichemical contamination in the Midwest US

USGS Publications Warehouse

Burkart, M.R.; Kolpin, D.W.; James, D.E.

1999-01-01

Agrichemicals (herbicides and nitrate) are significant sources of diffuse pollution to groundwater. Indirect methods are needed to assess the potential for groundwater contamination by diffuse sources because groundwater monitoring is too costly to adequately define the geographic extent of contamination at a regional or national scale. This paper presents examples of the application of statistical, overlay and index, and process-based modeling methods for groundwater vulnerability assessments to a variety of data from the Midwest U.S. The principles for vulnerability assessment include both intrinsic (pedologic, climatologic, and hydrogeologic factors) and specific (contaminant and other anthropogenic factors) vulnerability of a location. Statistical methods use the frequency of contaminant occurrence, contaminant concentration, or contamination probability as a response variable. Statistical assessments are useful for defining the relations among explanatory and response variables whether they define intrinsic or specific vulnerability. Multivariate statistical analyses are useful for ranking variables critical to estimating water quality responses of interest. Overlay and index methods involve intersecting maps of intrinsic and specific vulnerability properties and indexing the variables by applying appropriate weights. Deterministic models use process-based equations to simulate contaminant transport and are distinguished from the other methods in their potential to predict contaminant transport in both space and time. An example of a one-dimensional leaching model linked to a geographic information system (GIS) to define a regional metamodel for contamination in the Midwest is included.

Post-staining electroblotting for efficient and reliable peptide blotting.

PubMed

Lee, Der-Yen; Chang, Geen-Dong

2015-01-01

Post-staining electroblotting has been previously described to transfer Coomassie blue-stained proteins from polyacrylamide gel onto polyvinylidene difluoride (PVDF) membranes. Actually, stained peptides can also be efficiently and reliably transferred. Because of selective staining procedures for peptides and increased retention of stained peptides on the membrane, even peptides with molecular masses less than 2 kDa such as bacitracin and granuliberin R are transferred with satisfactory results. For comparison, post-staining electroblotting is about 16-fold more sensitive than the conventional electroblotting for visualization of insulin on the membrane. Therefore, the peptide blots become practicable and more accessible to further applications, e.g., blot overlay detection or immunoblotting analysis. In addition, the efficiency of peptide transfer is favorable for N-terminal sequence analysis. With this method, peptide blotting can be normalized for further analysis such as blot overlay assay, immunoblotting, and N-terminal sequencing for identification of peptide in crude or partially purified samples.

Secret Forwarding of Events over Distributed Publish/Subscribe Overlay Network.

PubMed

Yoon, Young; Kim, Beom Heyn

2016-01-01

Publish/subscribe is a communication paradigm where loosely-coupled clients communicate in an asynchronous fashion. Publish/subscribe supports the flexible development of large-scale, event-driven and ubiquitous systems. Publish/subscribe is prevalent in a number of application domains such as social networking, distributed business processes and real-time mission-critical systems. Many publish/subscribe applications are sensitive to message loss and violation of privacy. To overcome such issues, we propose a novel method of using secret sharing and replication techniques. This is to reliably and confidentially deliver decryption keys along with encrypted publications even under the presence of several Byzantine brokers across publish/subscribe overlay networks. We also propose a framework for dynamically and strategically allocating broker replicas based on flexibly definable criteria for reliability and performance. Moreover, a thorough evaluation is done through a case study on social networks using the real trace of interactions among Facebook users.

Secret Forwarding of Events over Distributed Publish/Subscribe Overlay Network

PubMed Central

Kim, Beom Heyn

2016-01-01

Publish/subscribe is a communication paradigm where loosely-coupled clients communicate in an asynchronous fashion. Publish/subscribe supports the flexible development of large-scale, event-driven and ubiquitous systems. Publish/subscribe is prevalent in a number of application domains such as social networking, distributed business processes and real-time mission-critical systems. Many publish/subscribe applications are sensitive to message loss and violation of privacy. To overcome such issues, we propose a novel method of using secret sharing and replication techniques. This is to reliably and confidentially deliver decryption keys along with encrypted publications even under the presence of several Byzantine brokers across publish/subscribe overlay networks. We also propose a framework for dynamically and strategically allocating broker replicas based on flexibly definable criteria for reliability and performance. Moreover, a thorough evaluation is done through a case study on social networks using the real trace of interactions among Facebook users. PMID:27367610

Patterning control strategies for minimum edge placement error in logic devices

NASA Astrophysics Data System (ADS)

Mulkens, Jan; Hanna, Michael; Slachter, Bram; Tel, Wim; Kubis, Michael; Maslow, Mark; Spence, Chris; Timoshkov, Vadim

2017-03-01

In this paper we discuss the edge placement error (EPE) for multi-patterning semiconductor manufacturing. In a multi-patterning scheme the creation of the final pattern is the result of a sequence of lithography and etching steps, and consequently the contour of the final pattern contains error sources of the different process steps. We describe the fidelity of the final pattern in terms of EPE, which is defined as the relative displacement of the edges of two features from their intended target position. We discuss our holistic patterning optimization approach to understand and minimize the EPE of the final pattern. As an experimental test vehicle we use the 7-nm logic device patterning process flow as developed by IMEC. This patterning process is based on Self-Aligned-Quadruple-Patterning (SAQP) using ArF lithography, combined with line cut exposures using EUV lithography. The computational metrology method to determine EPE is explained. It will be shown that ArF to EUV overlay, CDU from the individual process steps, and local CD and placement of the individual pattern features, are the important contributors. Based on the error budget, we developed an optimization strategy for each individual step and for the final pattern. Solutions include overlay and CD metrology based on angle resolved scatterometry, scanner actuator control to enable high order overlay corrections and computational lithography optimization to minimize imaging induced pattern placement errors of devices and metrology targets.

Latex and microsilica modified concrete bridge deck overlays in Oregon : final report.

DOT National Transportation Integrated Search

1997-05-01

The final report presents information collected by ODOT personnel from bridge deck overlays constructed in Oregon between 1989 and 1995. Decks were placed on a variety of existing bridge types prepared using hydrodemolition, milling, and diamond grin...

Texas flexible pavements and overlays : data analysis plans and reporting format.

DOT National Transportation Integrated Search

2012-01-01

This five-year project was initiated to collect materials and pavement performance data on a minimum of 100 : highway test sections around the State of Texas, incorporating flexible pavements and overlays. Besides being used to : calibrate and valida...

Overview of latex modified concrete overlays : final report.

DOT National Transportation Integrated Search

1984-01-01

Twelve bridges with latex modified concrete (LMC) overlays ranging in age from new to 13 years were studied and their general condition found to be good. The half-cell and chloride data were inconclusive because background data were not available for...

Evaluation of thin overlays for bridge decks.

DOT National Transportation Integrated Search

2010-11-01

Eight thin polymer overlay systems were evaluated in the laboratory and on two bridge decks exposed to trucks and passenger vehicles including those with studded tires. The products were Mark 154, Flex-O-Lith, Safetrack HW, Kwik Bond PPC MLS, Tyregri...

Type A polymer concrete overlay field trials : interim report.

DOT National Transportation Integrated Search

1982-12-01

On July 31 and August 1, 1982, the Oregon State Highway Division successfully placed a methyl methacrylate polymer concrete overlay on a portion of one span of a major interchange ramp in Portland, Oregon. Two proprietary polymer concretes were used ...

Evaluation of concrete slab fracturing techniques in mitigating reflective cracking through asphalt overlays.

DOT National Transportation Integrated Search

2002-09-01

This report presents the results of an evaluation of concrete slab fracturing techniques as a means of arresting or retarding reflective cracking through asphalt overlays placed on severely distressed portland cement concrete pavement. The study invo...

Performance trends of rehabilitated AC pavements

DOT National Transportation Integrated Search

2000-10-01

The General Pavement Study (GPS) 6 experiment, "AC Overlay of AC Pavements," involves pavement test sections where an asphalt concrete (AC) overlay was placed on an existing AC pavement. This TechBrief summarizes the results of a study of the GPS-6 e...

Evaluation of thin overlays for bridge decks.

DOT National Transportation Integrated Search

2009-11-01

Eight thin polymer overlay systems were evaluated in the laboratory and on two bridge decks exposed to trucks and passenger vehicles including those with studded tires. The products were Mark 154, Flex-O-Lith, Safetrack HW, Kwik Bond PPC MLS, Tyregri...

Thin bonded P.C.C. resurfacing : final report.

DOT National Transportation Integrated Search

1982-06-01

After the successful experimentation in Iowa with thin-bonded concrete overlays as an alternative to bituminous overlay, the Louisiana DOTD decided to resurface a short section of US 61, north of Baton Rouge, using this technique during April 1981. T...

Tolerable strains for hot mix asphalt overlays over concrete pavements.

DOT National Transportation Integrated Search

2013-01-01

Due to change of temperature and/or moisture, freezing-thaw cycles, loss of subgrade support by erosion, and traffic loading, concrete : pavements can develop different types of distresses during service life. Hot mix asphalt (HMA) overlays are commo...

Evaluation of Geosynthetics in Asphalt Overlays of Jointed Concrete Pavements

DOT National Transportation Integrated Search

2000-06-01

This report presents the findings and recommendations based on the Evaluation of Geosynthetics in Asphalt Overlays of Jointed Concrete Pavements. This project evaluated Linq Tac-711N and Strata Grid-200's ability to ease distress and reflective crack...

Preparation of rumble strips prior to overlayment.

DOT National Transportation Integrated Search

2010-07-01

The use of rumble strips in pavement to reduce run-off-road accidents is relatively new. In New Hampshire, these installations began in the mid to : late 1990s. The New Hampshire Department of Transportation performed its first overlay of rumble stri...

Forensic Study of Early Failures with Unbonded Concrete Overlays

DOT National Transportation Integrated Search

2017-11-01

A forensic investigation was conducted to identify failure mechanisms responsible for early failures of unbonded concrete overlays on selected projects in Ohio, including I-70 in Madison County, I-77 in Washington and Noble Counties, and I-90 in Lake...

Performance of an unbonded concrete overlay on I-74

DOT National Transportation Integrated Search

2002-04-01

In Illinois, the typical rehabilitation for a concrete pavement is full-depth patching of the distressed concrete, and overlaying the pavement with 3.25 inches of bituminous concrete. In cases where there are poor joints or extensive durability crack...

Natural resources information system.

NASA Technical Reports Server (NTRS)

Leachtenauer, J. C.; Woll, A. M.

1972-01-01

A computer-based Natural Resources Information System was developed for the Bureaus of Indian Affairs and Land Management. The system stores, processes and displays data useful to the land manager in the decision making process. Emphasis is placed on the use of remote sensing as a data source. Data input consists of maps, imagery overlays, and on-site data. Maps and overlays are entered using a digitizer and stored as irregular polygons, lines and points. Processing functions include set intersection, union and difference and area, length and value computations. Data output consists of computer tabulations and overlays prepared on a drum plotter.

Performance Evaluation of Cognitive Interference Channels Using a Spectrum Overlay Strategy

NASA Technical Reports Server (NTRS)

Knoblock, Eric J.

2018-01-01

The use of cognitive radios (CR) and cooperative communications techniques may assist in interference mitigation via sensing of the environment and dynamically altering communications parameters through the use of various mechanisms - one of which is the overlay technique. This report provides a performance analysis of an interference channel with a cognitive transceiver operating in an overlay configuration to evaluate the gains from using cognition. As shown in this report, a cognitive transceiver can simultaneously share spectrum while enhancing performance of non-cognitive nodes via knowledge of the communications channel as well as knowledge of neighboring users' modulation and coding schemes.

Successful treatment of direct carotid-cavernous fistula in a patient with Ehlers-Danlos syndrome type IV without arterial puncture: the transvenous triple-overlay embolization (TAILOREd) technique.

PubMed

Huynh, Thien J; Morton, Ryan P; Levitt, Michael R; Ghodke, Basavaraj V; Wink, Onno; Hallam, Danial K

2017-08-18

We report successful transvenous treatment of direct carotid-cavernous fistula in a patient with Ehlers-Danlos syndrome type IV using a novel triple-overlay embolization (TAILOREd) technique without the need for arterial puncture, which is known to be highly risky in this patient group. The TAILOREd technique allowed for successful treatment using preoperative MR angiography as a three-dimensional overlay roadmap combined with cone beam CT and live fluoroscopy, precluding the need for an arterial puncture. 2017 BMJ Publishing Group Ltd.

Kenny-Caffey Syndrome: oral findings and 4-year follow-up of overlay denture therapy.

PubMed

Demir, Tahsin; Kecik, Defne; Cehreli, Zafer C

2007-01-01

Kenny-Caffey Syndrome (KCS) is an extremely rare osteosclerotic bone dysplasia associated with hypocalcemia and ocular abnormalities. Although the condition is well reported in the medical literature, dental manifestations have not been discussed in great detail. The purpose of this report is to present specific oral features and prosthetic management in a KCS patient. Overlay dentures were utilized in the management of low vertical dimension of occlusion, congenital absence of several permanent teeth, and problems associated with function and esthetics. Results of the 4-year follow-up overlay denture therapy are presented.

KML Super Overlay to WMS Translator

NASA Technical Reports Server (NTRS)

Plesea, Lucian

2007-01-01

This translator is a server-based application that automatically generates KML super overlay configuration files required by Google Earth for map data access via the Open Geospatial Consortium WMS (Web Map Service) standard. The translator uses a set of URL parameters that mirror the WMS parameters as much as possible, and it also can generate a super overlay subdivision of any given area that is only loaded when needed, enabling very large areas of coverage at very high resolutions. It can make almost any dataset available as a WMS service visible and usable in any KML application, without the need to reformat the data.

Overlay accuracy on a flexible web with a roll printing process based on a roll-to-roll system.

PubMed

Chang, Jaehyuk; Lee, Sunggun; Lee, Ki Beom; Lee, Seungjun; Cho, Young Tae; Seo, Jungwoo; Lee, Sukwon; Jo, Gugrae; Lee, Ki-yong; Kong, Hyang-Shik; Kwon, Sin

2015-05-01

For high-quality flexible devices from printing processes based on Roll-to-Roll (R2R) systems, overlay alignment during the patterning of each functional layer poses a major challenge. The reason is because flexible substrates have a relatively low stiffness compared with rigid substrates, and they are easily deformed during web handling in the R2R system. To achieve a high overlay accuracy for a flexible substrate, it is important not only to develop web handling modules (such as web guiding, tension control, winding, and unwinding) and a precise printing tool but also to control the synchronization of each unit in the total system. A R2R web handling system and reverse offset printing process were developed in this work, and an overlay between the 1st and 2nd layers of ±5μm on a 500 mm-wide film was achieved at a σ level of 2.4 and 2.8 (x and y directions, respectively) in a continuous R2R printing process. This paper presents the components and mechanisms used in reverse offset printing based on a R2R system and the printing results including positioning accuracy and overlay alignment accuracy.