Investigation on the electron flux to the wall in the VENUS ion source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Thuillier, T., E-mail: thuillier@lpsc.in2p3.fr; Angot, J.; Benitez, J. Y.

The long-term operation of high charge state electron cyclotron resonance ion sources fed with high microwave power has caused damage to the plasma chamber wall in several laboratories. Porosity, or a small hole, can be progressively created in the chamber wall which can destroy the plasma chamber over a few year time scale. A burnout of the VENUS plasma chamber is investigated in which the hole formation in relation to the local hot electron power density is studied. First, the results of a simple model assuming that hot electrons are fully magnetized and strictly following magnetic field lines are presented.more » The model qualitatively reproduces the experimental traces left by the plasma on the wall. However, it is too crude to reproduce the localized electron power density for creating a hole in the chamber wall. Second, the results of a Monte Carlo simulation, following a population of scattering hot electrons, indicate a localized high power deposited to the chamber wall consistent with the hole formation process. Finally, a hypervapotron cooling scheme is proposed to mitigate the hole formation in electron cyclotron resonance plasma chamber wall.« less

Closed loop adaptive control of spectrum-producing step using neural networks

DOEpatents

Fu, Chi Yung

1998-01-01

Characteristics of the plasma in a plasma-based manufacturing process step are monitored directly and in real time by observing the spectrum which it produces. An artificial neural network analyzes the plasma spectrum and generates control signals to control one or more of the process input parameters in response to any deviation of the spectrum beyond a narrow range. In an embodiment, a plasma reaction chamber forms a plasma in response to input parameters such as gas flow, pressure and power. The chamber includes a window through which the electromagnetic spectrum produced by a plasma in the chamber, just above the subject surface, may be viewed. The spectrum is conducted to an optical spectrometer which measures the intensity of the incoming optical spectrum at different wavelengths. The output of optical spectrometer is provided to an analyzer which produces a plurality of error signals, each indicating whether a respective one of the input parameters to the chamber is to be increased or decreased. The microcontroller provides signals to control respective controls, but these lines are intercepted and first added to the error signals, before being provided to the controls for the chamber. The analyzer can include a neural network and an optional spectrum preprocessor to reduce background noise, as well as a comparator which compares the parameter values predicted by the neural network with a set of desired values provided by the microcontroller.

Closed loop adaptive control of spectrum-producing step using neural networks

DOEpatents

Fu, C.Y.

1998-11-24

Characteristics of the plasma in a plasma-based manufacturing process step are monitored directly and in real time by observing the spectrum which it produces. An artificial neural network analyzes the plasma spectrum and generates control signals to control one or more of the process input parameters in response to any deviation of the spectrum beyond a narrow range. In an embodiment, a plasma reaction chamber forms a plasma in response to input parameters such as gas flow, pressure and power. The chamber includes a window through which the electromagnetic spectrum produced by a plasma in the chamber, just above the subject surface, may be viewed. The spectrum is conducted to an optical spectrometer which measures the intensity of the incoming optical spectrum at different wavelengths. The output of optical spectrometer is provided to an analyzer which produces a plurality of error signals, each indicating whether a respective one of the input parameters to the chamber is to be increased or decreased. The microcontroller provides signals to control respective controls, but these lines are intercepted and first added to the error signals, before being provided to the controls for the chamber. The analyzer can include a neural network and an optional spectrum preprocessor to reduce background noise, as well as a comparator which compares the parameter values predicted by the neural network with a set of desired values provided by the microcontroller. 7 figs.

High-density plasma deposition manufacturing productivity improvement

NASA Astrophysics Data System (ADS)

Olmer, Leonard J.; Hudson, Chris P.

1999-09-01

High Density Plasma (HDP) deposition provides a means to deposit high quality dielectrics meeting submicron gap fill requirements. But, compared to traditional PECVD processing, HDP is relatively expensive due to the higher capital cost of the equipment. In order to keep processing costs low, it became necessary to maximize the wafer throughput of HDP processing without degrading the film properties. The approach taken was to optimize the post deposition microwave in-situ clean efficiency. A regression model, based on actual data, indicated that number of wafers processed before a chamber clean was the dominant factor. Furthermore, a design change in the ceramic hardware, surrounding the electrostatic chuck, provided thermal isolation resulting in an enhanced clean rate of the chamber process kit. An infra-red detector located in the chamber exhaust line provided a means to endpoint the clean and in-film particle data confirmed the infra-red results. The combination of increased chamber clean frequency, optimized clean time and improved process.

Electromagnetic analysis of the plasma chamber of an ECR-based charge breeder

DOE Office of Scientific and Technical Information (OSTI.GOV)

Galatà, A., E-mail: alessio.galata@lnl.infn.it; Patti, G.; Celona, L.

2016-02-15

The optimization of the efficiency of an ECR-based charge breeder is a twofold task: efforts must be paid to maximize the capture of the injected 1+ ions by the confined plasma and to produce high charge states to allow post-acceleration at high energies. Both tasks must be faced by studying in detail the electrons heating dynamics, influenced by the microwave-to-plasma coupling mechanism. Numerical simulations are a powerful tools for obtaining quantitative information about the wave-to-plasma interaction process: this paper presents a numerical study of the microwaves propagation and absorption inside the plasma chamber of the PHOENIX charge breeder, which themore » selective production of exotic species project, under construction at Legnaro National Laboratories, will adopt as charge breeder. Calculations were carried out with a commercial 3D FEM solver: first, all the resonant frequencies were determined by considering a simplified plasma chamber; then, the realistic geometry was taken into account, including a cold plasma model of increasing complexity. The results gave important information about the power absorption and losses and will allow the improvement of the plasma model to be used in a refined step of calculation reproducing the breeding process itself.« less

Electromagnetic analysis of the plasma chamber of an ECR-based charge breeder

NASA Astrophysics Data System (ADS)

Galatà, A.; Patti, G.; Celona, L.; Mascali, D.; Neri, L.; Torrisi, G.

2016-02-01

The optimization of the efficiency of an ECR-based charge breeder is a twofold task: efforts must be paid to maximize the capture of the injected 1+ ions by the confined plasma and to produce high charge states to allow post-acceleration at high energies. Both tasks must be faced by studying in detail the electrons heating dynamics, influenced by the microwave-to-plasma coupling mechanism. Numerical simulations are a powerful tools for obtaining quantitative information about the wave-to-plasma interaction process: this paper presents a numerical study of the microwaves propagation and absorption inside the plasma chamber of the PHOENIX charge breeder, which the selective production of exotic species project, under construction at Legnaro National Laboratories, will adopt as charge breeder. Calculations were carried out with a commercial 3D FEM solver: first, all the resonant frequencies were determined by considering a simplified plasma chamber; then, the realistic geometry was taken into account, including a cold plasma model of increasing complexity. The results gave important information about the power absorption and losses and will allow the improvement of the plasma model to be used in a refined step of calculation reproducing the breeding process itself.

Plasma arc welding repair of space flight hardware

NASA Technical Reports Server (NTRS)

Hoffman, David S.

1993-01-01

A technique to weld repair the main combustion chamber of Space Shuttle Main Engines has been developed. The technique uses the plasma arc welding process and active cooling to seal cracks and pinholes in the hot-gas wall of the main combustion chamber liner. The liner hot-gas wall is made of NARloy-Z, a copper alloy previously thought to be unweldable using conventional arc welding processes. The process must provide extensive heat input to melt the high conductivity NARloy-Z while protecting the delicate structure of the surrounding material. The higher energy density of the plasma arc process provides the necessary heat input while active water cooling protects the surrounding structure. The welding process is precisely controlled using a computerized robotic welding system.

Diagnostics of microwave assisted electron cyclotron resonance plasma source for surface modification of nylon 6

NASA Astrophysics Data System (ADS)

More, Supriya E.; Das, Partha Sarathi; Bansode, Avinash; Dhamale, Gayatri; Ghorui, S.; Bhoraskar, S. V.; Sahasrabudhe, S. N.; Mathe, Vikas L.

2018-01-01

Looking at the increasing scope of plasma processing of materials surface, here we present the development and diagnostics of a microwave assisted Electron Cyclotron Resonance (ECR) plasma system suitable for surface modification of polymers. Prior to the surface-treatment, a detailed diagnostic mapping of the plasma parameters throughout the reactor chamber was carried out by using single and double Langmuir probe measurements in Ar plasma. Conventional analysis of I-V curves as well as the elucidation form of the Electron Energy Distribution Function (EEDF) has become the source of calibration of plasma parameters in the reaction chamber. The high energy tail in the EEDF of electron temperature is seen to extend beyond 60 eV, at much larger distances from the ECR zone. This proves the suitability of the rector for plasma processing, since the electron energy is much beyond the threshold energy of bond breaking in most of the polymers. Nylon 6 is used as a representative candidate for surface processing in the presence of Ar, H2 + N2, and O2 plasma, treated at different locations inside the plasma chamber. In a typical case, the work of adhesion is seen to almost get doubled when treated with oxygen plasma. Morphology of the plasma treated surface and its hydrophilicity are discussed in view of the variation in electron density and electron temperature at these locations. Nano-protrusions arising from plasma treatment are set to be responsible for the hydrophobicity. Chemical sputtering and physical sputtering are seen to influence the surface morphology on account of sufficient electron energies and increased plasma potential.

Capacitively coupled RF diamond-like-carbon reactor

DOEpatents

Devlin, David James; Coates, Don Mayo; Archuleta, Thomas Arthur; Barbero, Robert Steven

2000-01-01

A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.

Apparatus and process for deposition of hard carbon films

DOEpatents

Nyaiesh, Ali R.; Garwin, Edward L.

1989-01-01

A process and an apparatus for depositing thin, amorphous carbon films having extreme hardness on a substrate is described. An enclosed chamber maintained at less than atmospheric pressure houses the substrate and plasma producing elements. A first electrode is comprised of a cavity enclosed within an RF coil which excites the plasma. A substrate located on a second electrode is excited by radio frequency power applied to the substrate. A magnetic field confines the plasma produced by the first electrode to the area away from the walls of the chamber and focuses the plasma onto the substrate thereby yielding film deposits having higher purity and having more rapid buildup than other methods of the prior art.

Apparatus and process for deposition of hard carbon films

DOEpatents

Nyaiesh, Ali R.; Garwin, Edward L.

1989-01-03

A process and an apparatus for depositing thin, amorphous carbon films having extreme hardness on a substrate is described. An enclosed chamber maintained at less than atmospheric pressure houses the substrate and plasma producing elements. A first electrode is comprised of a cavity enclosed within an RF coil which excites the plasma. A substrate located on a second electrode is excited by radio frequency power applied to the substrate. A magnetic field confines the plasma produced by the first electrode to the area away from the walls of the chamber and focuses the plasma onto the substrate thereby yielding film deposits having higher purity and having more rapid buildup than other methods of the prior art.

Plasma characterization for application in ballistics

DOE Office of Scientific and Technical Information (OSTI.GOV)

Katulka, G.; Nusca, M.; White, K.

1996-12-31

There is currently a strong motivation for improving the existing performance of fielded military gun systems. For that objective, research over the past several years has been carried out in an effort to enhance performance by addition of energy into the gun chamber by way of a plasma generator. This energy addition, referred to as Electro-thermal Chemical (ETC) propulsion, can be readily controlled electrically where it can be used to ignite the chamber`s energetic material, enhance the total energy, and control the interior process through control of the propellant combustion. To realize the potential advantages of this system it ismore » important to characterize the plasma generator in terms of (a) the impedance characteristics and its relationship to the pulse forming network used to generate the plasma, (b) the plasma output energy components such as radiation and convection in both time and space, (c) the details of the hydrodynamic interactions of the plasma with the propelling charge bed in the gun chamber and, (d) the direct effect of the plasma on the propellant reactions. Experimental studies have been carried out to study the effect of the plasma radiation on the propellant characteristics related to combustion.« less

Design and construction of Keda Space Plasma Experiment (KSPEX) for the investigation of the boundary layer processes of ionospheric depletions.

PubMed

Liu, Yu; Zhang, Zhongkai; Lei, Jiuhou; Cao, Jinxiang; Yu, Pengcheng; Zhang, Xiao; Xu, Liang; Zhao, Yaodong

2016-09-01

In this work, the design and construction of the Keda Space Plasma EXperiment (KSPEX), which aims to study the boundary layer processes of ionospheric depletions, are described in detail. The device is composed of three stainless-steel sections: two source chambers at both ends and an experimental chamber in the center. KSPEX is a steady state experimental device, in which hot filament arrays are used to produce plasmas in the two sources. A Macor-mesh design is adopted to adjust the plasma density and potential difference between the two plasmas, which creates a boundary layer with a controllable electron density gradient and inhomogeneous radial electric field. In addition, attachment chemicals can be released into the plasmas through a tailor-made needle valve which leads to the generation of negative ions plasmas. Ionospheric depletions can be modeled and simulated using KSPEX, and many micro-physical processes of the formation and evolution of an ionospheric depletion can be experimentally studied.

PULSION® HP: Tunable, High Productivity Plasma Doping

NASA Astrophysics Data System (ADS)

Felch, S. B.; Torregrosa, F.; Etienne, H.; Spiegel, Y.; Roux, L.; Turnbaugh, D.

2011-01-01

Plasma doping has been explored for many implant applications for over two decades and is now being used in semiconductor manufacturing for two applications: DRAM polysilicon counter-doping and contact doping. The PULSION HP is a new plasma doping tool developed by Ion Beam Services for high-volume production that enables customer control of the dominant mechanism—deposition, implant, or etch. The key features of this tool are a proprietary, remote RF plasma source that enables a high density plasma with low chamber pressure, resulting in a wide process space, and special chamber and wafer electrode designs that optimize doping uniformity.

Method and apparatus for plasma source ion implantation

DOEpatents

Conrad, J.R.

1988-08-16

Ion implantation into surfaces of three-dimensional targets is achieved by forming an ionized plasma about the target within an enclosing chamber and applying a pulse of high voltage between the target and the conductive walls of the chamber. Ions from the plasma are driven into the target object surfaces from all sides simultaneously without the need for manipulation of the target object. Repetitive pulses of high voltage, typically 20 kilovolts or higher, causes the ions to be driven deeply into the target. The plasma may be formed of a neutral gas introduced into the evacuated chamber and ionized therein with ionizing radiation so that a constant source of plasma is provided which surrounds the target object during the implantation process. Significant increases in the surface hardness and wear characteristics of various materials are obtained with ion implantation in this manner. 7 figs.

Method and apparatus for plasma source ion implantation

DOEpatents

Conrad, John R.

1988-01-01

Ion implantation into surfaces of three-dimensional targets is achieved by forming an ionized plasma about the target within an enclosing chamber and applying a pulse of high voltage between the target and the conductive walls of the chamber. Ions from the plasma are driven into the target object surfaces from all sides simultaneously without the need for manipulation of the target object. Repetitive pulses of high voltage, typically 20 kilovolts or higher, causes the ions to be driven deeply into the target. The plasma may be formed of a neutral gas introduced into the evacuated chamber and ionized therein with ionizing radiation so that a constant source of plasma is provided which surrounds the target object during the implantation process. Significant increases in the surface hardness and wear characteristics of various materials are obtained with ion implantation in this manner.

Plasma Spray-Physical Vapor Deposition (PS-PVD) of Ceramics for Protective Coatings

NASA Technical Reports Server (NTRS)

Harder, Bryan J.; Zhu, Dongming

2011-01-01

In order to generate advanced multilayer thermal and environmental protection systems, a new deposition process is needed to bridge the gap between conventional plasma spray, which produces relatively thick coatings on the order of 125-250 microns, and conventional vapor phase processes such as electron beam physical vapor deposition (EB-PVD) which are limited by relatively slow deposition rates, high investment costs, and coating material vapor pressure requirements. The use of Plasma Spray - Physical Vapor Deposition (PS-PVD) processing fills this gap and allows thin (< 10 microns) single layers to be deposited and multilayer coatings of less than 100 microns to be generated with the flexibility to tailor microstructures by changing processing conditions. Coatings of yttria-stabilized zirconia (YSZ) were applied to NiCrAlY bond coated superalloy substrates using the PS-PVD coater at NASA Glenn Research Center. A design-of-experiments was used to examine the effects of process variables (Ar/He plasma gas ratio, the total plasma gas flow, and the torch current) on chamber pressure and torch power. Coating thickness, phase and microstructure were evaluated for each set of deposition conditions. Low chamber pressures and high power were shown to increase coating thickness and create columnar-like structures. Likewise, high chamber pressures and low power had lower growth rates, but resulted in flatter, more homogeneous layers

Simulation of SiO2 etching in an inductively coupled CF4 plasma

NASA Astrophysics Data System (ADS)

Xu, Qing; Li, Yu-Xing; Li, Xiao-Ning; Wang, Jia-Bin; Yang, Fan; Yang, Yi; Ren, Tian-Ling

2017-02-01

Plasma etching technology is an indispensable processing method in the manufacturing process of semiconductor devices. Because of the high fluorine/carbon ratio of CF4, the CF4 gas is often used for etching SiO2. A commercial software ESI-CFD is used to simulate the process of plasma etching with an inductively coupled plasma model. For the simulation part, CFD-ACE is used to simulate the chamber, and CFD-TOPO is used to simulate the surface of the sample. The effects of chamber pressure, bias voltage and ICP power on the reactant particles were investigated, and the etching profiles of SiO2 were obtained. Simulation can be used to predict the effects of reaction conditions on the density, energy and angular distributions of reactant particles, which can play a good role in guiding the etching process.

System to continuously produce carbon fiber via microwave assisted plasma processing

DOEpatents

White, Terry L [Knoxville, TN; Paulauskas, Felix L [Knoxville, TN; Bigelow, Timothy S [Knoxville, TN

2010-11-02

A system to continuously produce fully carbonized or graphitized carbon fibers using microwave-assisted plasma (MAP) processing comprises an elongated chamber in which a microwave plasma is excited in a selected gas atmosphere. Fiber is drawn continuously through the chamber, entering and exiting through openings designed to minimize in-leakage of air. There is a gradient of microwave power within the chamber with generally higher power near where the fiber exits and lower power near where the fiber enters. Polyacrylonitrile (PAN), pitch, or any other suitable organic/polymeric precursor fibers can be used as a feedstock for the inventive system. Oxidized or partially oxidized PAN or pitch or other polymeric fiber precursors are run continuously through a MAP reactor in an inert, non-oxidizing atmosphere to heat the fibers, drive off the unwanted elements such as oxygen, nitrogen, and hydrogen, and produce carbon or graphite fibers faster than conventionally produced carbon fibers.

Plasma arc welding repair of space flight hardware

NASA Technical Reports Server (NTRS)

Hoffman, David S.

1993-01-01

Repair and refurbishment of flight and test hardware can extend the useful life of very expensive components. A technique to weld repair the main combustion chamber of space shuttle main engines has been developed. The technique uses the plasma arc welding process and active cooling to seal cracks and pinholes in the hot-gas wall of the main combustion chamber liner. The liner hot-gas wall is made of NARloyZ, a copper alloy previously thought to be unweldable using conventional arc welding processes. The process must provide extensive heat input to melt the high conductivity NARloyZ while protecting the delicate structure of the surrounding material. The higher energy density of the plasma arc process provides the necessary heat input while active water cooling protects the surrounding structure. The welding process is precisely controlled using a computerized robotic welding system.

Effects of humidity on sterilization of Geobacillus stearothermophilus spores with plasma-excited neutral gas

NASA Astrophysics Data System (ADS)

Matsui, Kei; Ikenaga, Noriaki; Sakudo, Noriyuki

2015-06-01

We investigate the effects of relative humidity on the sterilization process using a plasma-excited neutral gas that uniformly sterilizes both the space and inner wall of the reactor chamber at atmospheric pressure. Only reactive neutral species such as plasma-excited gas molecules and radicals were separated from the plasma and sent to the reactor chamber for chemical sterilization. The plasma source gas is nitrogen mixed with 0.1% oxygen, and the relative humidity in the source gas is controlled by changing the mixing ratio of water vapor. The relative humidity near the sample in the reactor chamber is controlled by changing the sample temperature. As a result, the relative humidity near the sample should be kept in the range from 60 to 90% for the sterilization of Geobacillus stearothermophilus spores. When the relative humidity in the source gas increases from 30 to 90%, the sterilization effect is enhanced by the same degree.

Fast Gas Replacement in Plasma Process Chamber by Improving Gas Flow Pattern

NASA Astrophysics Data System (ADS)

Morishita, Sadaharu; Goto, Tetsuya; Akutsu, Isao; Ohyama, Kenji; Ito, Takashi; Ohmi, Tadahiro

2009-01-01

The precise and high-speed alteration of various gas species is important for realizing precise and well-controlled multiprocesses in a single plasma process chamber with high throughput. The gas replacement times in the replacement of N2 by Ar and that of H2 by Ar are measured in a microwave excited high-density and low electron-temperature plasma process chamber at various working pressures and gas flow rates, incorporating a new gas flow control system, which can avoid overshoot of the gas pressure in the chamber immediately after the valve operation, and a gradational lead screw booster pump, which can maintain excellent pumping capability for various gas species including lightweight gases such as H2 in a wide pressure region from 10-1 to 104 Pa. Furthermore, to control the gas flow pattern in the chamber, upper ceramic shower plates, which have thousands of very fine gas injection holes (numbers of 1200 and 2400) formed with optimized allocation on the plates, are adopted, while the conventional gas supply method in the microwave-excited plasma chamber uses many holes only opened at the sidewall of the chamber (gas ring). It has been confirmed that, in the replacement of N2 by Ar, a short replacement time of approximately 1 s in the cases of 133 and 13.3 Pa and approximately 3 s in the case of 4 Pa can be achieved when the upper shower plate has 2400 holes, while a replacement time longer than approximately 10 s is required for all pressure cases where the gas ring is used. In addition, thanks to the excellent pumping capability of the gradational lead screw booster pump for lightweight gases, it has also been confirmed that the replacement time of H2 by Ar is almost the same as that of N2 by Ar.

Vacuum Plasma Spray Forming of Copper Alloy Liners for Regeneratively Cooled Liquid Rocket Combustion Chambers

NASA Technical Reports Server (NTRS)

Zimmerman, Frank

2003-01-01

Vacuum plasma spray (VPS) has been demonstrated as a method to form combustion chambers from copper alloys NARloy-Z and GRCop-84. Vacuum plasma spray forming is of particular interest in the forming of CuCrNb alloys such as GRCop-84, developed by NASA s Glenn Research Center, because the alloy cannot be formed using conventional casting and forging methods. This limitation is related to the levels of chromium and niobium in the alloy, which exceed the solubility limit in copper. Until recently, the only forming process that maintained the required microstructure of CrNb intermetallics was powder metallurgy formation of a billet from powder stock, followed by extrusion. This severely limits its usefulness in structural applications, particularly the complex shapes required for combustion chamber liners. This paper discusses the techniques used to form combustion chambers from CuCrNb and NARloy-Z, which will be used in regeneratively cooled liquid rocket combustion chambers.

The segmented non-uniform dielectric module design for uniformity control of plasma profile in a capacitively coupled plasma chamber

NASA Astrophysics Data System (ADS)

Xia, Huanxiong; Xiang, Dong; Yang, Wang; Mou, Peng

2014-12-01

Low-temperature plasma technique is one of the critical techniques in IC manufacturing process, such as etching and thin-film deposition, and the uniformity greatly impacts the process quality, so the design for the plasma uniformity control is very important but difficult. It is hard to finely and flexibly regulate the spatial distribution of the plasma in the chamber via controlling the discharge parameters or modifying the structure in zero-dimensional space, and it just can adjust the overall level of the process factors. In the view of this problem, a segmented non-uniform dielectric module design solution is proposed for the regulation of the plasma profile in a CCP chamber. The solution achieves refined and flexible regulation of the plasma profile in the radial direction via configuring the relative permittivity and the width of each segment. In order to solve this design problem, a novel simulation-based auto-design approach is proposed, which can automatically design the positional sequence with multi independent variables to make the output target profile in the parameterized simulation model approximate the one that users preset. This approach employs an idea of quasi-closed-loop control system, and works in an iterative mode. It starts from initial values of the design variable sequences, and predicts better sequences via the feedback of the profile error between the output target profile and the expected one. It never stops until the profile error is narrowed in the preset tolerance.

Two-chamber configuration of Bio-Nano electron cyclotron resonance ion source for fullerene modification.

PubMed

Uchida, T; Rácz, R; Muramatsu, M; Kato, Y; Kitagawa, A; Biri, S; Yoshida, Y

2016-02-01

We report on the modification of fullerenes with iron and chlorine using two individually controllable plasmas in the Bio-Nano electron cyclotron resonance ion source (ECRIS). One of the plasmas is composed of fullerene and the other one is composed of iron and chlorine. The online ion beam analysis allows one to investigate the rate of the vapor-phase collisional modification process in the ECRIS, while the offline analyses (e.g., liquid chromatography-mass spectrometry) of the materials deposited on the plasma chamber can give information on the surface-type process. Both analytical methods show the presence of modified fullerenes such as fullerene-chlorine, fullerene-iron, and fullerene-chlorine-iron.

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

NASA Technical Reports Server (NTRS)

Routh, D. E.; Sharma, G. C. (Inventor)

1984-01-01

An apparatus is disclosed which includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a dc magnetron sputtering system. A gas inlet introduces various gases to the vacuum chamber and creates various gas plasma during the sputtering steps. The rotating turntables insure that the respective wafers are present under the sputtering guns for an average amount of time such that consistency in sputtering and deposition is achieved. By continuous and sequential processing of the wafers in a common vacuum chamber without removal, the adverse affects of exposure to atmospheric conditions are eliminated providing higher quality circuit contacts and functional device.

Method for sequentially processing a multi-level interconnect circuit in a vacuum chamber

NASA Technical Reports Server (NTRS)

Routh, D. E.; Sharma, G. C. (Inventor)

1982-01-01

The processing of wafer devices to form multilevel interconnects for microelectronic circuits is described. The method is directed to performing the sequential steps of etching the via, removing the photo resist pattern, back sputtering the entire wafer surface and depositing the next layer of interconnect material under common vacuum conditions without exposure to atmospheric conditions. Apparatus for performing the method includes a vacuum system having a vacuum chamber in which wafers are processed on rotating turntables. The vacuum chamber is provided with an RF sputtering system and a DC magnetron sputtering system. A gas inlet is provided in the chamber for the introduction of various gases to the vacuum chamber and the creation of various gas plasma during the sputtering steps.

Plasma Chamber Design and Fabrication Activities

NASA Astrophysics Data System (ADS)

Parodi, B.; Bianchi, A.; Cucchiaro, A.; Coletti, A.; Frosi, P.; Mazzone, G.; Pizzuto, A.; Ramogida, G.; Coppi, B.

2006-10-01

A fabrication procedure for a typical Plasma Chamber (PC) sector has been developed to cover all the manufacturing phases, from the raw materials specification (including metallurgical processes) to the machining operations, acceptance procedures and vacuum tests. Basically, the sector is made of shaped elements (forged or rolled) welded together using special fixtures and then machined to achieve the final dimensional accuracy. An upgraded design of the plasma chamber's vertical support that can withstand the estimated electromagnetic loads (Eddy and Halo current plus horizontal net force resulting from the worst plasma disruption scenario VDE, Vertical Displacement Event) has been completed. The maintenance of the radial support can take place hands-on with a direct access from outside the cryostat. With the present design, vacuum tightness is achieved by welding conducted with automatic welding heads. On the outer surface of the PC a dedicated duct system, filled by helium gas, is included to cool down the PC to room temperature when needed.

Detection of Chamber Conditioning Through Optical Emission and Impedance Measurements

NASA Technical Reports Server (NTRS)

Cruden, Brett A.; Rao, M. V. V. S.; Sharma, Surendra P.; Meyyappan, Meyya

2001-01-01

During oxide etch processes, buildup of fluorocarbon residues on reactor sidewalls can cause run-to-run drift and will necessitate some time for conditioning and seasoning of the reactor. Though diagnostics can be applied to study and understand these phenomena, many of them are not practical for use in an industrial reactor. For instance, measurements of ion fluxes and energy by mass spectrometry show that the buildup of insulating fluorocarbon films on the reactor surface will cause a shift in both ion energy and current in an argon plasma. However, such a device cannot be easily integrated into a processing system. The shift in ion energy and flux will be accompanied by an increase in the capacitance of the plasma sheath. The shift in sheath capacitance can be easily measured by a common commercially available impedance probe placed on the inductive coil. A buildup of film on the chamber wall is expected to affect the production of fluorocarbon radicals, and thus the presence of such species in the optical emission spectrum of the plasma can be monitored as well. These two techniques are employed on a GEC (Gaseous Electronics Conference) Reference Cell to assess the validity of optical emission and impedance monitoring as a metric of chamber conditioning. These techniques are applied to experimental runs with CHF3 and CHF3/O2/Ar plasmas, with intermediate monitoring of pure argon plasmas as a reference case for chamber conditions.

Method And Apparatus For Launching Microwave Energy Into A Plasma Processing Chamber

DOEpatents

DOUGHTY, FRANK C.; [et al

2001-05-01

A method and apparatus for launching microwave energy to a plasma processing chamber in which the required magnetic field is generated by a permanent magnet structure and the permanent magnet material effectively comprises one or more surfaces of the waveguide structure. The waveguide structure functions as an impedance matching device and controls the field pattern of the launched microwave field to create a uniform plasma. The waveguide launcher may comprise a rectangular waveguide, a circular waveguide, or a coaxial waveguide with permanent magnet material forming the sidewalls of the guide and a magnetization pattern which produces the required microwave electron cyclotron resonance magnetic field, a uniform field absorption pattern, and a rapid decay of the fields away from the resonance zone. In addition, the incorporation of permanent magnet material as a portion of the waveguide structure places the magnetic material in close proximity to the vacuum chamber, allowing for a precisely controlled magnetic field configuration, and a reduction of the amount of permanent magnet material required.

Two-chamber configuration of Bio-Nano electron cyclotron resonance ion source for fullerene modification

DOE Office of Scientific and Technical Information (OSTI.GOV)

Uchida, T., E-mail: uchida-t@toyo.jp; Graduate School of Interdisciplinary New Science, Toyo University, Kawagoe 350-8585; Rácz, R.

2016-02-15

We report on the modification of fullerenes with iron and chlorine using two individually controllable plasmas in the Bio-Nano electron cyclotron resonance ion source (ECRIS). One of the plasmas is composed of fullerene and the other one is composed of iron and chlorine. The online ion beam analysis allows one to investigate the rate of the vapor-phase collisional modification process in the ECRIS, while the offline analyses (e.g., liquid chromatography-mass spectrometry) of the materials deposited on the plasma chamber can give information on the surface-type process. Both analytical methods show the presence of modified fullerenes such as fullerene-chlorine, fullerene-iron, andmore » fullerene-chlorine-iron.« less

Apparatus and method for oxidation and stabilization of polymeric materials

DOEpatents

Paulauskas, Felix L [Knoxville, TN; White, Terry L [Knoxville, TN; Sherman, Daniel M [Knoxville, TN

2009-05-19

An apparatus for treating polymeric materials comprises a treatment chamber adapted to maintain a selected atmosphere; a means for supporting the polymeric material within the chamber; and, a source of plasma-derived gas containing at least one reactive oxidative species whereby the polymer is stabilized and cross linked through exposure to the oxidative species in the chamber at a selected temperature. The polymer may be directly exposed to the plasma, or alternatively, the plasma may be established in a separate volume from which the reactive species may be extracted and introduced into the vicinity of the polymer. The apparatus may be configured for either batch-type or continuous-type processing. The apparatus and method are especially useful for preparing polymer fibers, particularly PAN fibers, for later carbonization treatments.

Apparatus and method for oxidation and stabilization of polymeric materials

DOEpatents

Paulauskas, Felix L [Knoxville, TN; White, Terry L [Knoxville, TN; Sherman, Daniel M [Knoxville, TN

2010-08-31

An apparatus for treating polymeric materials comprises a treatment chamber adapted to maintain a selected atmosphere; a means for supporting the polymeric material within the chamber; and, a source of plasma-derived gas containing at least one reactive oxidative species whereby the polymer is stabilized and cross linked through exposure to the oxidative species in the chamber at a selected temperature. The polymer may be directly exposed to the plasma, or alternatively, the plasma may be established in a separate volume from which the reactive species may be extracted and introduced into the vicinity of the polymer. The apparatus may be configured for either batch-type or continuous-type processing. The apparatus and method are especially useful for preparing polymer fibers, particularly PAN fibers, for later carbonization treatments.

Particle based plasma simulation for an ion engine discharge chamber

NASA Astrophysics Data System (ADS)

Mahalingam, Sudhakar

Design of the next generation of ion engines can benefit from detailed computer simulations of the plasma in the discharge chamber. In this work a complete particle based approach has been taken to model the discharge chamber plasma. This is the first time that simplifying continuum assumptions on the particle motion have not been made in a discharge chamber model. Because of the long mean free paths of the particles in the discharge chamber continuum models are questionable. The PIC-MCC model developed in this work tracks following particles: neutrals, singly charged ions, doubly charged ions, secondary electrons, and primary electrons. The trajectories of these particles are determined using the Newton-Lorentz's equation of motion including the effects of magnetic and electric fields. Particle collisions are determined using an MCC statistical technique. A large number of collision processes and particle wall interactions are included in the model. The magnetic fields produced by the permanent magnets are determined using Maxwell's equations. The electric fields are determined using an approximate input electric field coupled with a dynamic determination of the electric fields caused by the charged particles. In this work inclusion of the dynamic electric field calculation is made possible by using an inflated plasma permittivity value in the Poisson solver. This allows dynamic electric field calculation with minimal computational requirements in terms of both computer memory and run time. In addition, a number of other numerical procedures such as parallel processing have been implemented to shorten the computational time. The primary results are those modeling the discharge chamber of NASA's NSTAR ion engine at its full operating power. Convergence of numerical results such as total number of particles inside the discharge chamber, average energy of the plasma particles, discharge current, beam current and beam efficiency are obtained. Steady state results for the particle number density distributions and particle loss rates to the walls are presented. Comparisons of numerical results with experimental measurements such as currents and the particle number density distributions are made. Results from a parametric study and from an alternative magnetic field design are also given.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Morishita, Sadaharu; Goto, Tetsuya; Nagase, Masaaki

Multiprocesses in a single plasma process chamber with high throughput require precise, sequential, high-speed alteration of partial pressures of multiple gas species. A conventional gas-distribution system cannot realize this because the system seriously overshoots gas pressure immediately following valve operation. Furthermore, chamber volume and conductance of gas piping between the system and chamber should both be considered because they delay the stabilizing time of gas pressure. Therefore, the authors proposed a new gas-distribution system without overshoot by controlling gas flow rate based on pressure measurement, as well as a method of pulse-controlled gas injection immediately following valve operation. Time variationmore » of measured partial pressure agrees well with a calculation based on an equivalent-circuit model that represents the chamber and gas piping between the system and chamber. Using pulse-controlled gas injection, the stabilizing time can be reduced drastically to 0.6 s for HBr added to pure Ar plasma, and 0.7 s for O{sub 2} added to Ar/HBr plasma; without the pulse control, the stabilizing times are 3 and 7 s, respectively. In the O{sub 2} addition case, rapid stabilization can be achieved during the period of line/space pattern etching of poly-Si on a thin SiO{sub 2} film. This occurs without anomalous etching of the underlying SiO{sub 2} film or the Si substrate near the sidewall, thus obtaining a wide process margin with high throughput.« less

Optimization of PECVD Chamber Cleans Through Fundamental Studies of Electronegative Fluorinated Gas Discharges.

NASA Astrophysics Data System (ADS)

Langan, John

1996-10-01

The predominance of multi-level metalization schemes in advanced integrated circuit manufacturing has greatly increased the importance of plasma enhanced chemical vapor deposition (PECVD) and in turn in-situ plasma chamber cleaning. In order to maintain the highest throughput for these processes the clean step must be as short as possible. In addition, there is an increasing desire to minimize the fluorinated gas usage during the clean, while maximizing its efficiency, not only to achieve lower costs, but also because many of the gases used in this process are global warming compounds. We have studied the fundamental properties of discharges of NF_3, CF_4, and C_2F6 under conditions relevant to chamber cleaning in the GEC rf reference cell. Using electrical impedance analysis and optical emission spectroscopy we have determined that the electronegative nature of these discharges defines the optimal processing conditions by controlling the power coupling efficiency and mechanisms of power dissipation in the discharge. Examples will be presented where strategies identified by these studies have been used to optimize actual manufacturing chamber clean processes. (This work was performed in collaboration with Mark Sobolewski, National Institute of Standards and Technology, and Brian Felker, Air Products and Chemicals, Inc.)

The simulation of the geosynchronous Earth orbit plasma environment in Chamber A: An assessment of possible experimental investigations

NASA Technical Reports Server (NTRS)

Bernstein, W.

1981-01-01

The possible use of Chamber A for the replication or simulation of space plasma physics processes which occur in the geosynchronous Earth orbit (GEO) environment is considered. It is shown that replication is not possible and that scaling of the environmental conditions is required for study of the important instability processes. Rules for such experimental scaling are given. At the present time, it does not appear technologically feasible to satisfy these requirements in Chamber A. It is, however, possible to study and qualitatively evaluate the problem of vehicle charging at GEO. In particular, Chamber A is sufficiently large that a complete operational spacecraft could be irradiated by beams and charged to high potentials. Such testing would contribute to the assessment of the operational malfunctions expected at GEO and their possible correction. However, because of the many tabulated limitations in such a testing programs, its direct relevance to conditions expected in the geo environment remains questionable.

Correlation study of actual temperature profile and in-line metrology measurements for within-wafer uniformity improvement and wafer edge yield enhancement (Conference Presentation)

NASA Astrophysics Data System (ADS)

Fang, Fang; Vaid, Alok; Vinslava, Alina; Casselberry, Richard; Mishra, Shailendra; Dixit, Dhairya; Timoney, Padraig; Chu, Dinh; Porter, Candice; Song, Da; Ren, Zhou

2018-03-01

It is getting more important to monitor all aspects of influencing parameters in critical etch steps and utilize them as tuning knobs for within-wafer uniformity improvement and wafer edge yield enhancement. Meanwhile, we took a dive in pursuing "measuring what matters" and challenged ourselves for more aspects of signals acquired in actual process conditions. Among these factors which are considered subtle previously, we identified Temperature, especially electrostatic chuck (ESC) Temperature measurement in real etch process conditions have direct correlation to in-line measurements. In this work, we used SensArray technique (EtchTemp-SE wafer) to measure ESC temperature profile on a 300mm wafer with plasma turning on to reproduce actual temperature pattern on wafers in real production process conditions. In field applications, we observed substantial correlation between ESC temperature and in-line optical metrology measurements and since temperature is a process factor that can be tuning through set-temperature modulations, we have identified process knobs with known impact on physical profile variations. Furthermore, ESC temperature profile on a 300mm wafer is configured as multiple zones upon radius and SensArray measurements mechanism could catch such zonal distribution as well, which enables detailed temperature modulations targeting edge ring only where most of chips can be harvested and critical zone for yield enhancement. Last but not least, compared with control reference (ESC Temperature in static plasma-off status), we also get additional factors to investigate in chamber-to-chamber matching study and make process tool fleet match on the basis really matters in production. KLA-Tencor EtchTemp-SE wafer enables Plasma On wafer temperature monitoring of silicon etch process. This wafer is wireless and has 65 sensors with measurement range from 20 to 140°C. the wafer is designed to run in real production recipe plasma on condition with maximum RF power up to 7KW. The wafer surface is coated with Yttrium oxide film which allows Silicon Etch chemistry. At Fab-8, we carried investigations in 14 nm FEOL critical etch process which has direct impact on yield, using SensorArray EtchTemp-SE wafer, we measured ESC temperature profile across multiple chambers, for both plasma on and plasma off, promising results achieved on chamber temperature signature identification, guideline for chamber to chamber matching improvement. Correlation between wafer mean temperature and determining criticality-process parameters of recess depth and CD is observed. Furthermore, detail zonal temperature/profile correlation is investigated to identify individual correlation in each chuck zone, and provided unique process knobs corresponding to each chunk. Meanwhile, passive ESC Chuck DOE was done to modulate wafer temperature at different zones, and Sensor Array wafer measurements verified temperature responding well with the ESC set point. Correlation R2 = 0.9979 for outer ring and R2 = 0.9981 for Mid Outer ring is observed, as shown in . Experiments planning to modulate edge zone ESC temperature to tune profile within-wafer uniformity and prove gain in edge yield enhancement and to improve edge yield is underway.

Prediction of plasma properties in mercury ion thrusters

NASA Technical Reports Server (NTRS)

Longhurst, G. R.

1978-01-01

A simplified theoretical model was developed which obtains to first order the plasma properties in the discharge chamber of a mercury ion thruster from basic thruster design and controllable operating parameters. The basic operation and design of ion thrusters is discussed, and the important processes which influence the plasma properties are described in terms of the design and control parameters. The conservation for mass, charge and energy were applied to the ion production region, which was defined as the region of the discharge chamber having as its outer boundary the surface of revolution of the innermost field line to intersect the anode. Mass conservation and the equations describing the various processes involved with mass addition and removal from the ion production region are satisfied by a Maxwellian electron density spatial distribution in that region.

Vacuum plasma spray applications on liquid fuel rocket engines

NASA Technical Reports Server (NTRS)

Mckechnie, T. N.; Zimmerman, F. R.; Bryant, M. A.

1992-01-01

The vacuum plasma spray process (VPS) has been developed by NASA and Rocketdyne for a variety of applications on liquid fuel rocket engines, including the Space Shuttle Main Engine. These applications encompass thermal barrier coatings which are thermal shock resistant for turbopump blades and nozzles; bond coatings for cryogenic titanium components; wear resistant coatings and materials; high conductivity copper, NaRloy-Z, combustion chamber liners, and structural nickel base material, Inconel 718, for nozzle and combustion chamber support jackets.

Optimization of the Magnetic Field Structure for Sustained Plasma Gun Helicity Injection for Magnetic Turbulence Studies at the Bryn Mawr Plasma Laboratory

NASA Astrophysics Data System (ADS)

Cartagena-Sanchez, C. A.; Schaffner, D. A.; Johnson, H. K.; Fahim, L. E.

2017-10-01

A long-pulsed magnetic coaxial plasma gun is being implemented and characterized at the Bryn Mawr Plasma Laboratory (BMPL). A cold cathode discharged between the cylindrical electrodes generates and launches plasma into a 24cm diameter, 2m long chamber. Three separately pulsed magnetic coils are carefully positioned to generate radial magnetic field between the electrodes at the gun edge in order to provide stuffing field. Magnetic helicity is continuously injected into the flux-conserving vacuum chamber in a process akin to sustained slow-formation of spheromaks. The aim of this source, however, is to supply long pulses of turbulent magnetized plasma for measurement rather than for sustained spheromak production. The work shown here details the optimization of the magnetic field structure for this sustained helicity injection.

Recent Progress on the magnetic turbulence experiment at the Bryn Mawr Plasma Laboratory

NASA Astrophysics Data System (ADS)

Schaffner, D. A.; Cartagena-Sanchez, C. A.; Johnson, H. K.; Fahim, L. E.; Fiedler-Kawaguchi, C.; Douglas-Mann, E.

2017-10-01

Recent progress is reported on the construction, implementation and testing of the magnetic turbulence experiment at the Bryn Mawr Plasma Laboratory (BMPL). The experiment at the BMPL consists of an ( 300 μs) long coaxial plasma gun discharge that injects magnetic helicity into a flux-conserving chamber in a process akin to sustained slow-formation of spheromaks. A 24cm by 2m cylindrical chamber has been constructed with a high density axial port array to enable detailed simultaneous spatial measurements of magnetic and plasma fluctuations. Careful positioning of the magnetic structure produced by the three separately pulsed coils (one internal, two external) are preformed to optimize for continuous injection of turbulent magnetized plasma. High frequency calibration of magnetic probes is also underway using a power amplifier.

Study of supersonic plasma technology jets

NASA Astrophysics Data System (ADS)

Selezneva, Svetlana; Gravelle, Denis; Boulos, Maher; van de Sanden, Richard; Schram, Dc

2001-10-01

Recently some new techniques using remote thermal plasma for thin film deposition and plasma chemistry processes were developed. These techniques include PECVD of diamonds, diamond-like and polymer films; a-C:H and a-Si:H films. The latter are of especial interest because of their applications for solar cell production industry. In remote plasma deposition, thermal plasma is formed by means of one of traditional plasma sources. The chamber pressure is reduced with the help of continuous pumping. In that way the flow is accelerated up to the supersonic speed. The plasma expansion is controlled using a specific torch nozzle design. To optimize the deposition process detailed knowledge about the gas dynamic structure of the jet and chemical kinetics mechanisms is required. In the paper, we show how the flow pattern and the character of the deviations from local thermodynamic equilibrium differs in plasmas generated by different plasma sources, such as induction plasma torch, traditional direct current arc and cascaded arc. We study the effects of the chamber pressure, nozzle design and carrier gas on the resulting plasma properties. The analysis is performed by means of numerical modeling using commercially available FLUENT program with incorporated user-defined subroutines for two-temperature model. The results of continuum mechanics approach are compared with that of the kinetic Monte Carlo method and with the experimental data.

Influence of heat and particle fluxes nonlocality on spatial distribution of plasma density in two-chamber inductively coupled plasma sources

NASA Astrophysics Data System (ADS)

Kudryavtsev, A. A.; Serditov, K. Yu.

2012-07-01

This study presents 2D simulations of the two-chamber inductively coupled plasma source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber. Depending on pressure, two main scenarios of plasma density and its spatial distribution behavior were identified. One case is characterized by the localization of plasma in the small driver chamber where power is deposed. Another case describes when the diffusion chamber becomes the main source of plasma with maximum of the electron density. The differences in spatial distribution are caused by local or non-local behavior of electron energy transport in the discharge volume due to different characteristic scale of heat transfer with electronic conductivity.

Real-time curling probe monitoring of dielectric layer deposited on plasma chamber wall

NASA Astrophysics Data System (ADS)

Hotta, Masaya; Ogawa, Daisuke; Nakamura, Keiji; Sugai, Hideo

2018-04-01

A microwave resonator probe called a curling probe (CP) was applied to in situ monitoring of a dielectric layer deposited on a chamber wall during plasma processing. The resonance frequency of the CP was analytically found to shift in proportion to the dielectric layer thickness; the proportionality constant was determined from a comparison with the finite-difference time-domain (FDTD) simulation result. Amorphous carbon layers deposited in acetylene inductively coupled plasma (ICP) discharge were monitored using the CP. The measured resonance frequency shift dictated the carbon layer thickness, which agreed with the results from the surface profiler and ellipsometry.

Advanced electric propulsion and space plasma contactor research

NASA Technical Reports Server (NTRS)

Wilbur, P. J.

1986-01-01

A series of experiments performed on an 8 cm dia. ring cusp magnetic field ion thruster are described. The results show the effects of anode and cathode position and size, ring cusp axial location and discharge chamber length on plasma ion energy cost and extracted ion fraction. Thruster performance is shown to be improved substantially when optimum values of these parameters are used. Investigations into the basic plasma phenomena associated with the process of plasma contacting are described. The results show the process of electron collection from a background plasma to a hollow cathode plasma contactor exhibits a higher impedance than the process of electron emission from the hollow cathode. The importance of having cold ions present to facilitate the plasma contacting process is shown. Results of experiments into the behavior of hollow cathodes operating at high interelectrode pressures (up to approx. 100 Torr) on nitrogen and ammonia are presented. They suggest that diffuse emission from the insert of a hollow cathode can be sustained at high interelectrode pressures if the cathode is made of non-conducting material and the cathode internal pressure is reduced by evacuating the cathode interior. A theoretical model of discharge chamber operation developed for inert gas thrusters is extended so it can be used to evaluste the performance of mercury ion thrusters. Predictions of the model are compared to experimental results obtained on two 30 cm dia. thrusters.

Analysis of flow field characteristics in IC equipment chamber based on orthogonal design

NASA Astrophysics Data System (ADS)

Liu, W. F.; Yang, Y. Y.; Wang, C. N.

2017-01-01

This paper aims to study the influence of the configuration of processing chamber as a part of IC equipment on flow field characteristics. Four parameters, including chamber height, chamber diameter, inlet mass flow rate and outlet area, are arranged using orthogonally design method to study their influence on flow distribution in the processing chamber with the commercial software-Fluent. The velocity, pressure and temperature distribution above the holder were analysed respectively. The velocity difference value of the gas flow above the holder is defined as the evaluation criteria to evaluate the uniformity of the gas flow. The quantitative relationship between key parameters and the uniformity of gas flow was found through analysis of experimental results. According to our study, the chamber height is the most significant factor, and then follows the outlet area, chamber diameter and inlet mass flow rate. This research can provide insights into the study and design of configuration of etcher, plasma enhanced chemical vapor deposition (PECVD) equipment, and other systems with similar configuration and processing condition.

VPS Process for Copper Components in Thrust Chamber Assemblies

NASA Technical Reports Server (NTRS)

Elam, Sandra; Holmes, Richard; Hickman, Robert; McKechnie, Tim; Thom, George

2005-01-01

For several years, NASA's Marshall Space Flight Center (MSFC) has been working with Plasma Processes, Inc., (PPI) to fabricate thrust chamber liners with GRCop-84. Using the vacuum plasma spray (VPS) process, chamber liners of a variety of shapes and sizes have been created. Each has been formed as a functional gradient material (FGM) that creates a unique protective layer of NiCrAlY on the GRCop-84 liner s hot wall surface. Hot-fire testing was successfully conducted on a subscale unit to demonstrate the liner's durability and performance. Similar VPS technology has also been applied to create functional gradient coatings (FGC) on copper injector faceplates. Protective layers of NiCrAlY and zirconia were applied to both coaxial and impinging faceplate designs. Hot-fire testing is planned for these coated injectors in April 2005. The resulting material systems for both copper alloy components allows them to operate at higher temperatures with improved durability and operating margins.

Method of plasma etching GA-based compound semiconductors

DOEpatents

Qiu, Weibin; Goddard, Lynford L.

2013-01-01

A method of plasma etching Ga-based compound semiconductors includes providing a process chamber and a source electrode adjacent thereto. The chamber contains a Ga-based compound semiconductor sample in contact with a platen which is electrically connected to a first power supply, and the source electrode is electrically connected to a second power supply. SiCl.sub.4 and Ar gases are flowed into the chamber. RF power is supplied to the platen at a first power level, and RF power is supplied to the source electrode. A plasma is generated. Then, RF power is supplied to the platen at a second power level lower than the first power level and no greater than about 30 W. Regions of a surface of the sample adjacent to one or more masked portions of the surface are etched at a rate of no more than about 25 nm/min to create a substantially smooth etched surface.

Effects of additional vapors on sterilization of microorganism spores with plasma-excited neutral gas

NASA Astrophysics Data System (ADS)

Matsui, Kei; Ikenaga, Noriaki; Sakudo, Noriyuki

2015-01-01

Some fundamental experiments are carried out in order to develop a plasma process that will uniformly sterilize both the space and inner wall of the reactor chamber at atmospheric pressure. Air, oxygen, argon, and nitrogen are each used as the plasma source gas to which mixed vapors of water and ethanol at different ratios are added. The reactor chamber is remotely located from the plasma area and a metal mesh for eliminating charged particles is installed between them. Thus, only reactive neutral particles such as plasma-excited gas molecules and radicals are utilized. As a result, adding vapors to the source gas markedly enhances the sterilization effect. In particular, air with water and/or ethanol vapor and oxygen with ethanol vapor show more than 6-log reduction for Geobacillus stearothermophilus spores.

Laser-induced plasma cloud interaction and ice multiplication under cirrus cloud conditions

PubMed Central

Leisner, Thomas; Duft, Denis; Möhler, Ottmar; Saathoff, Harald; Schnaiter, Martin; Henin, Stefano; Stelmaszczyk, Kamil; Petrarca, Massimo; Delagrange, Raphaëlle; Hao, Zuoqiang; Lüder, Johannes; Petit, Yannick; Rohwetter, Philipp; Kasparian, Jérôme; Wolf, Jean-Pierre; Wöste, Ludger

2013-01-01

Potential impacts of lightning-induced plasma on cloud ice formation and precipitation have been a subject of debate for decades. Here, we report on the interaction of laser-generated plasma channels with water and ice clouds observed in a large cloud simulation chamber. Under the conditions of a typical storm cloud, in which ice and supercooled water coexist, no direct influence of the plasma channels on ice formation or precipitation processes could be detected. Under conditions typical for thin cirrus ice clouds, however, the plasma channels induced a surprisingly strong effect of ice multiplication. Within a few minutes, the laser action led to a strong enhancement of the total ice particle number density in the chamber by up to a factor of 100, even though only a 10−9 fraction of the chamber volume was exposed to the plasma channels. The newly formed ice particles quickly reduced the water vapor pressure to ice saturation, thereby increasing the cloud optical thickness by up to three orders of magnitude. A model relying on the complete vaporization of ice particles in the laser filament and the condensation of the resulting water vapor on plasma ions reproduces our experimental findings. This surprising effect might open new perspectives for remote sensing of water vapor and ice in the upper troposphere. PMID:23733936

Network simulation-based optimization of centrifugo-pneumatic blood plasma separation

PubMed Central

Zehnle, S.; Zengerle, R.; von Stetten, F.; Paust, N.

2017-01-01

Automated and robust separation of 14 μl of plasma from 40 μl of whole blood at a purity of 99.81% ± 0.11% within 43 s is demonstrated for the hematocrit range of 20%–60% in a centrifugal microfluidic polymer disk. At high rotational frequency, red blood cells (RBCs) within whole blood are concentrated in a radial outer RBC collection chamber. Simultaneously, plasma is concentrated in a radial inner pneumatic chamber, where a defined air volume is enclosed and compressed. Subsequent reduction of the rotational frequency to not lower than 25 Hz enables rapid transfer of supernatant plasma into a plasma collection chamber, with highly suppressed resuspension of red blood cells. Disk design and the rotational protocol are optimized to make the process fast, robust, and insusceptible for undesired cell resuspension. Numerical network simulation with lumped model elements is used to predict and optimize the fluidic characteristics. Lysis of the remaining red blood cells in the purified plasma, followed by measurement of the hemoglobin concentration, was used to determine plasma purity. Due to the pneumatic actuation, no surface treatment of the fluidic cartridge or any additional external means are required, offering the possibility for low-cost mass fabrication technologies, such as injection molding or thermoforming. PMID:28798850

Laser-induced plasma cloud interaction and ice multiplication under cirrus cloud conditions.

PubMed

Leisner, Thomas; Duft, Denis; Möhler, Ottmar; Saathoff, Harald; Schnaiter, Martin; Henin, Stefano; Stelmaszczyk, Kamil; Petrarca, Massimo; Delagrange, Raphaëlle; Hao, Zuoqiang; Lüder, Johannes; Petit, Yannick; Rohwetter, Philipp; Kasparian, Jérôme; Wolf, Jean-Pierre; Wöste, Ludger

2013-06-18

Potential impacts of lightning-induced plasma on cloud ice formation and precipitation have been a subject of debate for decades. Here, we report on the interaction of laser-generated plasma channels with water and ice clouds observed in a large cloud simulation chamber. Under the conditions of a typical storm cloud, in which ice and supercooled water coexist, no direct influence of the plasma channels on ice formation or precipitation processes could be detected. Under conditions typical for thin cirrus ice clouds, however, the plasma channels induced a surprisingly strong effect of ice multiplication. Within a few minutes, the laser action led to a strong enhancement of the total ice particle number density in the chamber by up to a factor of 100, even though only a 10(-9) fraction of the chamber volume was exposed to the plasma channels. The newly formed ice particles quickly reduced the water vapor pressure to ice saturation, thereby increasing the cloud optical thickness by up to three orders of magnitude. A model relying on the complete vaporization of ice particles in the laser filament and the condensation of the resulting water vapor on plasma ions reproduces our experimental findings. This surprising effect might open new perspectives for remote sensing of water vapor and ice in the upper troposphere.

PLASMA GENERATOR

DOEpatents

Foster, J.S. Jr.

1958-03-11

This patent describes apparatus for producing an electricity neutral ionized gas discharge, termed a plasma, substantially free from contamination with neutral gas particles. The plasma generator of the present invention comprises a plasma chamber wherein gas introduced into the chamber is ionized by a radiofrequency source. A magnetic field is used to focus the plasma in line with an exit. This magnetic field cooperates with a differential pressure created across the exit to draw a uniform and uncontaminated plasma from the plasma chamber.

Fourth-generation plasma immersion ion implantation and deposition facility for hybrid surface modification layer fabrication.

PubMed

Wang, Langping; Huang, Lei; Xie, Zhiwen; Wang, Xiaofeng; Tang, Baoyin

2008-02-01

The fourth-generation plasma immersion ion implantation and deposition (PIIID) facility for hybrid and batch treatment was built in our laboratory recently. Comparing with our previous PIIID facilities, several novel designs are utilized. Two multicathode pulsed cathodic arc plasma sources are fixed on the chamber wall symmetrically, which can increase the steady working time from 6 h (the single cathode source in our previous facilities) to about 18 h. Meanwhile, the inner diameter of the pulsed cathodic arc plasma source is increased from the previous 80 to 209 mm, thus, large area metal plasma can be obtained by the source. Instead of the simple sample holder in our previous facility, a complex revolution-rotation sample holder composed of 24 shafts, which can rotate around its axis and adjust its position through revolving around the center axis of the vacuum chamber, is fixed in the center of the vacuum chamber. In addition, one magnetron sputtering source is set on the chamber wall instead of the top cover in the previous facility. Because of the above characteristic, the PIIID hybrid process involving ion implantation, vacuum arc, and magnetron sputtering deposition can be acquired without breaking vacuum. In addition, the PIIID batch treatment of cylinderlike components can be finished by installing these components on the rotating shafts on the sample holder.

Method of fabricating a rocket engine combustion chamber

NASA Technical Reports Server (NTRS)

Holmes, Richard R. (Inventor); Mckechnie, Timothy N. (Inventor); Power, Christopher A. (Inventor); Daniel, Ronald L., Jr. (Inventor); Saxelby, Robert M. (Inventor)

1993-01-01

A process for making a combustion chamber for a rocket engine wherein a copper alloy in particle form is injected into a stream of heated carrier gas in plasma form which is then projected onto the inner surface of a hollow metal jacket having the configuration of a rocket engine combustion chamber is described. The particles are in the plasma stream for a sufficient length of time to heat the particles to a temperature such that the particles will flatten and adhere to previously deposited particles but will not spatter or vaporize. After a layer is formed, cooling channels are cut in the layer, then the channels are filled with a temporary filler and another layer of particles is deposited.

Electron Energy Distribution function in a weakly magnetized expanding helicon plasma discharge

NASA Astrophysics Data System (ADS)

Sirse, Nishant; Harvey, Cleo; Gaman, Cezar; Ellingboe, Bert

2016-09-01

Helicon wave heating is well known to produce high-density plasma source for application in plasma thrusters, plasma processing and many more. Our previous study (B Ellingboe et al. APS Gaseous Electronics Conference 2015, abstract #KW2.005) has shown observation of helicon wave in a weakly magnetized inductively coupled plasma source excited by m =0 antenna at 13.56 MHz. In this paper, we investigated the Electron Energy Distribution Function (EEDF) in the same setup by using an RF compensated Langmuir probe. The ac signal superimposition technique (second harmonic technique) is used to determine EEDF. The EEDF is measured for 5-100 mTorr gas pressure, 100 W - 1.5 kW rf power and at different locations in the source chamber, boundary and diffusion chamber. This paper will discuss the change in the shape of EEDF for various heating mode transitions.

Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasma

PubMed Central

Kawakami, Masatoshi; Metzler, Dominik; Li, Chen; Oehrlein, Gottlieb S.

2016-01-01

The authors studied the effect of the temperature and chemical state of the chamber wall on process performance for atomic layer etching of SiO2 using a steady-state Ar plasma, periodic injection of a defined number of C4F8 molecules, and synchronized plasma-based Ar+ ion bombardment. To evaluate these effects, the authors measured the quartz coupling window temperature. The plasma gas phase chemistry was characterized using optical emission spectroscopy. It was found that although the thickness of the polymer film deposited in each cycle is constant, the etching behavior changed, which is likely related to a change in the plasma gas phase chemistry. The authors found that the main gas phase changes occur after C4F8 injection. The C4F8 and the quartz window react and generate SiF and CO. The emission intensity changes with wall surface state and temperature. Therefore, changes in the plasma gas species generation can lead to a shift in etching performance during processing. During initial cycles, minimal etching is observed, while etching gradually increases with cycle number. PMID:27375342

Numerical studies of wall–plasma interactions and ionization phenomena in an ablative pulsed plasma thruster

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yang, Lei; School of Astronautics, Beihang University, Beijing 100191; Zeng, Guangshang

2016-07-15

Wall–plasma interactions excited by ablation controlled arcs are very critical physical processes in pulsed plasma thrusters (PPTs). Their effects on the ionization processes of ablated vapor into discharge plasma directly determine PPT performances. To reveal the physics governing the ionization phenomena in PPT discharge, a modified model taking into account the pyrolysis effect of heated polytetrafluoroethylene propellant on the wall–plasma interactions was developed. The feasibility of the modified model was analyzed by creating a one-dimensional simulation of a rectangular ablative PPT. The wall–plasma interaction results based on this modified model were found to be more realistic than for the unmodifiedmore » model; this reflects the dynamic changes of the inflow parameters during discharge in our model. Furthermore, the temporal and spatial variations of the different plasma species in the discharge chamber were numerically studied. The numerical studies showed that polytetrafluoroethylene plasma was mainly composed of monovalent ions; carbon and fluorine ions were concentrated in the upstream and downstream discharge chamber, respectively. The results based on this modified model were in good agreement with the experimental formation times of the various plasma species. A large number of short-lived and highly ionized carbon and fluorine species (divalent and trivalent ions) were created during initial discharge. These highly ionized species reached their peak density earlier than the singly ionized species.« less

Transition from edge-localized to center-localized power deposition in helicon discharges

NASA Astrophysics Data System (ADS)

Curreli, D.

2011-11-01

In radiofrequency (RF) helicon discharges the electromagnetic power is transferred from the RF field irradiated by the antenna to the plasma medium by means of plasma-wave coupling of the electromagnetic wave with the electrons. For the common industrial frequencies of tens of MHz, and for typical pressures of few Pascals, the power deposition occurs mostly at the edge of the discharge. In these conditions, ionization and electron heating occur in a layer close to the chamber walls, where a consistent fraction of the plasma is rapidly lost by diffusion toward the surface. The remaining fraction of plasma diffuses inward toward the center of the discharge, setting up a uniform and almost flat density profile, used in applications. A one-dimensional model considering both the plasma-wave coupling of the electrons with the RF wave and the macroscopic transport of ions and neutrals along the radial dimension of a cylindrical processing chamber has been derived and used to evaluate the profiles at equilibrium. The model has been validated through Langmuir probe measurements in helicon processing chambers. The numerical model has then been used to study the power-coupling behavior of the discharge when the pressure of the neutral gas is decreased. When the Knudsen number of the neutral gas approaches unity and in conditions of slightly magnetized discharge, the power deposition shifts from being edge-localized to center-localized, thus reducing the particle fluxes toward the walls and increasing the efficiency of the coupling.

PlasmaLab/Eco-Plasma - The future of complex plasma research in space

NASA Astrophysics Data System (ADS)

Knapek, Christina; Thomas, Hubertus; Huber, Peter; Mohr, Daniel; Hagl, Tanja; Konopka, Uwe; Lipaev, Andrey; Morfill, Gregor; Molotkov, Vladimir

The next Russian-German cooperation for the investigation of complex plasmas under microgravity conditions on the International Space Station (ISS) is the PlasmaLab/Eco-Plasma project. Here, a new plasma chamber -- the ``Zyflex'' chamber -- is being developed. The chamber is a cylindrical plasma chamber with parallel electrodes and a flexible system geometry. It is designed to extend the accessible plasma parameter range, i.e. neutral gas pressure, plasma density and electron temperature, and also to allow an independent control of the plasma parameters, therefore increasing the experimental quality and expected knowledge gain significantly. With this system it will be possible to reach low neutral gas pressures (which means weak damping of the particle motion) and to generate large, homogeneous 3D particle systems for studies of fundamental phenomena such as phase transitions, dynamics of liquids or phase separation. The Zyflex chamber has already been operated in several parabolic flight campaigns with different configurations during the last years, yielding a promising outlook for its future development. Here, we will present the current status of the project, the technological advancements the Zyflex chamber will offer compared to its predecessors, and the latest scientific results from experiments on ground and in microgravity conditions during parabolic flights. This work and some of the authors are funded by DLR/BMWi (FKZ 50 WP 0700).

Plasma generating apparatus for large area plasma processing

DOEpatents

Tsai, C.C.; Gorbatkin, S.M.; Berry, L.A.

1991-07-16

A plasma generating apparatus for plasma processing applications is based on a permanent magnet line-cusp plasma confinement chamber coupled to a compact single-coil microwave waveguide launcher. The device creates an electron cyclotron resonance (ECR) plasma in the launcher and a second ECR plasma is created in the line cusps due to a 0.0875 tesla magnetic field in that region. Additional special magnetic field configuring reduces the magnetic field at the substrate to below 0.001 tesla. The resulting plasma source is capable of producing large-area (20-cm diam), highly uniform (.+-.5%) ion beams with current densities above 5 mA/cm[sup 2]. The source has been used to etch photoresist on 5-inch diam silicon wafers with good uniformity. 3 figures.

Plasma generating apparatus for large area plasma processing

DOEpatents

Tsai, Chin-Chi; Gorbatkin, Steven M.; Berry, Lee A.

1991-01-01

A plasma generating apparatus for plasma processing applications is based on a permanent magnet line-cusp plasma confinement chamber coupled to a compact single-coil microwave waveguide launcher. The device creates an electron cyclotron resonance (ECR) plasma in the launcher and a second ECR plasma is created in the line cusps due to a 0.0875 tesla magnetic field in that region. Additional special magnetic field configuring reduces the magnetic field at the substrate to below 0.001 tesla. The resulting plasma source is capable of producing large-area (20-cm diam), highly uniform (.+-.5%) ion beams with current densities above 5 mA/cm.sup.2. The source has been used to etch photoresist on 5-inch diam silicon wafers with good uniformity.

Investigation of air gasification of micronized coal, mechanically activated using the plasma control of the process

NASA Astrophysics Data System (ADS)

Butakov, Evgenii; Burdukov, Anatoly; Chernetskiy, Mikhail; Kuznetsov, Victor

2017-10-01

Combination of the processes of coal combustion and gasification into a single technology of mechano-chemical and plasma-chemical activation is of a considerable scientific and technological interest. Enhancement of coal reactivity at their grinding with mechanical activation is associated with an increase in the reaction rate of carbon material, and at plasma-chemical effect, the main is an increase in reactivity of the oxidizing agent caused by the high plasma temperatures of atomic oxygen. The process of gasification was studied on the 1-MW setup with tangential scroll supply of pulverized coal-air mixture and cylindrical reaction chamber. Coal ground by the standard boiler mill is fed to the disintegrator, then, it is sent to the scroll inlet of the burner-reactor with the transport air. Pulverized coal is ignited by the plasmatron of 10-kW power. In experiments on air gasification of micronized coal, carried out at the temperature in the reaction chamber of 1000-1200°C and air excess α = 0.3-1, the data on CO concentration of 11% and H2 concentration of up to 6% were obtained. Air and air-steam gasification of mechanically-activated micronized coals with plasma control was calculated using SigmaFlow software package.

Simultaneous specimen and stage cleaning device for analytical electron microscope

DOEpatents

Zaluzec, Nestor J.

1996-01-01

An improved method and apparatus are provided for cleaning both a specimen stage, a specimen and an interior of an analytical electron microscope (AEM). The apparatus for cleaning a specimen stage and specimen comprising a plasma chamber for containing a gas plasma and an air lock coupled to the plasma chamber for permitting passage of the specimen stage and specimen into the plasma chamber and maintaining an airtight chamber. The specimen stage and specimen are subjected to a reactive plasma gas that is either DC or RF excited. The apparatus can be mounted on the analytical electron microscope (AEM) for cleaning the interior of the microscope.

Plasma parameter diagnosis using hydrogen emission spectra of a quartz-chamber 2.45 GHz ECRIS at Peking University

NASA Astrophysics Data System (ADS)

Wu, WenBin; Ren, HaiTao; Peng, ShiXiang; Xu, Yuan; Wen, JiaMei; Zhang, Tao; Zhang, JingFeng; Zhang, AiLin; Sun, Jiang; Guo, ZhiYu; Chen, JiaEr

2018-04-01

A quartz-chamber 2.45 GHz electron cyclotron resonance ion source (ECRIS) was designed for diagnostic purposes at Peking University [Patent Number: ZL 201110026605.4]. This ion source can produce a maximum 84 mA hydrogen ion beam at 50 kV with a duty factor of 10%. The root-mean-square (RMS) emittance of this beam is less than 0.12π mm mrad. In our initial work, the electron temperature and electron density inside the plasma chamber had been measured with the line intensity ratio of noble gases. Based on these results, the atomic and molecular emission spectra of hydrogen were applied to determine the dissociation degree of hydrogen and the vibrational temperature of hydrogen molecules in the ground state, respectively. Measurements were performed at gas pressures from 4×10-4 to 1×10-3 Pa and at input peak RF power ranging from 1000 to 1800 W. The dissociation degree of hydrogen in the range of 0.5%-10% and the vibrational temperature of hydrogen molecules in the ground state in the range of 3500-8500 K were obtained. The plasma processes inside this ECRIS chamber were discussed based on these results.

DOE Office of Scientific and Technical Information (OSTI.GOV)

White, Terry L.; Paulauskas, Felix L.; Bigelow, Timothy S.

A method for continuously processing carbon fiber including establishing a microwave plasma in a selected atmosphere contained in an elongated chamber having a microwave power gradient along its length defined by a lower microwave power at one end and a higher microwave power at the opposite end of the elongated chamber. The elongated chamber having an opening in each of the ends of the chamber that are adapted to allow the passage of the fiber tow while limiting incidental gas flow into or out of said chamber. A continuous fiber tow is introduced into the end of the chamber havingmore » the lower microwave power. The fiber tow is withdrawn from the opposite end of the chamber having the higher microwave power. The fiber to is subjected to progressively higher microwave energy as the fiber is being traversed through the elongated chamber.« less

Plasma rotation in the Peking University Plasma Test device.

PubMed

Xiao, Chijie; Chen, Yihang; Yang, Xiaoyi; Xu, Tianchao; Wang, Long; Xu, Min; Guo, Dong; Yu, Yi; Lin, Chen

2016-11-01

Some preliminary results of plasma rotations in a linear plasma experiment device, Peking University Plasma Test (PPT) device, are reported in this paper. PPT has a cylindrical vacuum chamber with 500 mm diameter and 1000 mm length, and a pair of Helmholtz coils which can generate cylindrical or cusp magnetic geometry with magnitude from 0 to 2000 G. Plasma was generated by a helicon source and the typical density is about 10 13 cm -3 for the argon plasma. Some Langmuir probes, magnetic probes, and one high-speed camera are set up to diagnose the rotational plasmas. The preliminary results show that magnetic fluctuations exist during some plasma rotation processes with both cylindrical and cusp magnetic geometries, which might be related to some electromagnetic processes and need further studies.

Improved Back-Side Purge-Gas Chambers For Plasma Arc Welding

NASA Technical Reports Server (NTRS)

Ezell, Kenneth G.; Mcgee, William F.; Rybicki, Daniel J.

1995-01-01

Improved chambers for inert-gas purging of back sides of workpieces during plasma arc welding in keyhole (full-penetration) mode based on concept of directing flows of inert gases toward, and concentrating them on, hot weld zones. Tapered chamber concentrates flow of inert gas on plasma arc plume and surrounding metal.

Selective ion source

DOEpatents

Leung, K.N.

1996-05-14

A ion source is described wherein selected ions maybe extracted to the exclusion of unwanted ion species of higher ionization potential. Also described is a method of producing selected ions from a compound, such as P{sup +} from PH{sub 3}. The invention comprises a plasma chamber, an electron source, a means for introducing a gas to be ionized by electrons from the electron source, means for limiting electron energy from the electron source to a value between the ionization energy of the selected ion species and the greater ionization energy of an unwanted ion specie, and means for extracting the target ion specie from the plasma chamber. In one embodiment, the electrons are generated in a plasma cathode chamber immediately adjacent to the plasma chamber. A small extractor draws the electrons from the plasma cathode chamber into the relatively positive plasma chamber. The energy of the electrons extracted in this manner is easily controlled. The invention is particularly useful for doping silicon with P{sup +}, As{sup +}, and B{sup +} without the problematic presence of hydrogen, helium, water, or carbon oxide ions. Doped silicon is important for manufacture of semiconductors and semiconductor devices. 6 figs.

Selective ion source

DOEpatents

Leung, Ka-Ngo

1996-01-01

A ion source is described wherein selected ions maybe extracted to the exclusion of unwanted ion species of higher ionization potential. Also described is a method of producing selected ions from a compound, such as P.sup.+ from PH.sub.3. The invention comprises a plasma chamber, an electron source, a means for introducing a gas to be ionized by electrons from the electron source, means for limiting electron energy from the electron source to a value between the ionization energy of the selected ion species and the greater ionization energy of an unwanted ion specie, and means for extracting the target ion specie from the plasma chamber. In one embodiment, the electrons are generated in a plasma cathode chamber immediately adjacent to the plasma chamber. A small extractor draws the electrons from the plasma cathode chamber into the relatively positive plasma chamber. The energy of the electrons extracted in this manner is easily controlled. The invention is particularly useful for doping silicon with P.sup.+, AS.sup.+, and B.sup.+ without the problematic presence of hydrogen, helium, water, or carbon oxide ions. Doped silicon is important for manufacture of semiconductors and semiconductor devices.

Process Diagnostics and Monitoring Using the Multipole Resonance Probe (MRP)

NASA Astrophysics Data System (ADS)

Harhausen, J.; Awakowicz, P.; Brinkmann, R. P.; Foest, R.; Lapke, M.; Musch, T.; Mussenbrock, T.; Oberrath, J.; Ohl, A.; Rolfes, I.; Schulz, Ch.; Storch, R.; Styrnoll, T.

2011-10-01

In this contribution we present the application of the MRP in an industrial plasma ion assisted deposition (PIAD) chamber (Leybold optics SYRUS-pro). The MRP is a novel plasma diagnostic which is suitable for an industrial environment - which means that the proposed method is robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike. In order to employ the MRP as process diagnostics we mounted the probe on a manipulator to obtain spatially resolved information on the electron density and temperature. As monitoring tool the MRP is installed at a fixed position. Even during the deposition process it provides stable measurement results while other diagnostic methods, e.g. the Langmuir probe, may suffer from dielectric coatings. In this contribution we present the application of the MRP in an industrial plasma ion assisted deposition (PIAD) chamber (Leybold optics SYRUS-pro). The MRP is a novel plasma diagnostic which is suitable for an industrial environment - which means that the proposed method is robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike. In order to employ the MRP as process diagnostics we mounted the probe on a manipulator to obtain spatially resolved information on the electron density and temperature. As monitoring tool the MRP is installed at a fixed position. Even during the deposition process it provides stable measurement results while other diagnostic methods, e.g. the Langmuir probe, may suffer from dielectric coatings. Funded by the German Ministry for Education and Research (BMBF, Fkz. 13N10462).

Vacuum Plasma Spray of CuCrNb Alloy for Advanced Liquid - Fuel Combustion Chambers

NASA Technical Reports Server (NTRS)

Zimmerman, Frank

2000-01-01

The copper-8 atomic percent chromium-4 atomic percent niobium (CuCrNb) alloy was developed by Glenn Research Center (formally Lewis Research Center) as an improved alloy for combustion chamber liners. In comparison to NARloy-Z, the baseline (as in Space Shuttle Main Engine) alloy for such liners, CuCrNb demonstrates mechanical and thermophysical properties equivalent to NARloy-Z, but at temperatures 100 C to 150 C (180 F to 270 F) higher. Anticipated materials related benefits include decreasing the thrust cell liner weight 5% to 20%, increasing the service life at least two fold over current combustion chamber design, and increasing the safety margins available to designers. By adding an oxidation and thermal barrier coating to the liner, the combustion chamber can operate at even higher temperatures. For all these benefits, however, this alloy cannot be formed using conventional casting and forging methods because of the levels of chromium and niobium, which exceed their solubility limit in copper. Until recently, the only forming process that maintains the required microstructure of CrNb intermetallics is powder metallurgy formation of a billet from powder stock, followed by extrusion. This severely limits its usefulness in structural applications, particularly the complex shapes required for combustion chamber liners. Vacuum plasma spray (VPS) has been demonstrated as a method to form structural articles including small combustion chambers from the CuCrNb alloy. In addition, an oxidation and thermal barrier layer can be formed integrally on the hot wall of the liner that improve performance and extend service life. This paper discusses the metallurgy and thermomechanical properties of VPS formed CuCrNb versus the baseline powder metallurgy process, and the manufacturing of small combustion chamber liners at Marshall Space Flight Center using the VPS process. The benefits to advanced propulsion initiatives of using VPS to fabricate combustion chamber liners while maintaining the superior CuCrNb properties are also presented.

Selective Functionalization of Carbon Nanotubes: Part II

NASA Technical Reports Server (NTRS)

Meyyappan, Meyya; Khare, Bishun

2010-01-01

An alternative method of low-temperature plasma functionalization of carbon nanotubes provides for the simultaneous attachment of molecular groups of multiple (typically two or three) different species or different mixtures of species to carbon nanotubes at different locations within the same apparatus. This method is based on similar principles, and involves the use of mostly the same basic apparatus, as those of the methods described in "Low-Temperature Plasma Functionalization of Carbon Nanotubes" (ARC-14661-1), NASA Tech Briefs, Vol. 28, No. 5 (May 2004), page 45. The figure schematically depicts the basic apparatus used in the aforementioned method, with emphasis on features that distinguish the present alternative method from the other. In this method, one exploits the fact that the composition of the deposition plasma changes as the plasma flows from its source in the precursor chamber toward the nanotubes in the target chamber. As a result, carbon nanotubes mounted in the target chamber at different flow distances (d1, d2, d3 . . .) from the precursor chamber become functionalized with different species or different mixtures of species. In one series of experiments to demonstrate this method, N2 was used as the precursor gas. After the functionalization process, the carbon nanotubes from three different positions in the target chamber were examined by Fourier-transform infrared spectroscopy to identify the molecular groups that had become attached. On carbon nanotubes from d1 = 1 cm, the attached molecular groups were found to be predominantly C-N and C=N. On carbon nanotubes from d2 = 2.5 cm, the attached molecular groups were found to be predominantly C-(NH)2 and/or C=NH2. (The H2 was believed to originate as residual hydrogen present in the nanotubes.) On carbon nanotubes from d3 = 7 cm no functionalization could be detected - perhaps, it was conjectured, because this distance is downstream of the plasma source, all of the free ions and free radicals of the plasma had recombined into molecules.

Formation of carbon allotrope aerosol by colliding plasmas in an inertial fusion reactor

NASA Astrophysics Data System (ADS)

Hirooka, Y.; Sato, H.; Ishihara, K.; Yabuuchi, T.; Tanaka, K. A.

2014-02-01

Along with repeated implosions, the interior of an inertial fusion target chamber is exposed to short pulses of high-energy x-ray, unburned DT-fuel particles, He-ash and pellet debris. As a result, chamber wall materials are subjected to ablation, emitting particles in the plasma state. Ablated particles will either be re-deposited elsewhere or collide with each other, perhaps in the centre-of-symmetry region of the chamber volume. Colliding ablation plasma particles can lead to the formation of clusters to grow into aerosol, possibly floating thereafter, which can deteriorate the subsequent implosion performance via laser scattering, etc. In a laboratory-scale YAG laser setup, the formation of nano-scale aerosol has been demonstrated in vacuum at irradiation power densities of the orders of 108-10 W cm-2 at 10 Hz, each 6 ns long, simulating the high-repetition rate inertial fusion reactor situation. Interestingly, carbon aerosol formation has been observed in the form of fullerene onion, nano- and micro-tubes when laser-ablated plasma plumes of carbon collide with each other. In contrast, colliding plasma plumes of metals tend to generate aerosol in the form of droplets under identical laser irradiation conditions. An atomic and molecular reaction model is proposed to interpret the process of carbon allotrope aerosol formation.

Large area plasma source

NASA Technical Reports Server (NTRS)

Foster, John (Inventor); Patterson, Michael (Inventor)

2008-01-01

An all permanent magnet Electron Cyclotron Resonance, large diameter (e.g., 40 cm) plasma source suitable for ion/plasma processing or electric propulsion, is capable of producing uniform ion current densities at its exit plane at very low power (e.g., below 200 W), and is electrodeless to avoid sputtering or contamination issues. Microwave input power is efficiently coupled with an ionizing gas without using a dielectric microwave window and without developing a throat plasma by providing a ferromagnetic cylindrical chamber wall with a conical end narrowing to an axial entrance hole for microwaves supplied on-axis from an open-ended waveguide. Permanent magnet rings are attached inside the wall with alternating polarities against the wall. An entrance magnet ring surrounding the entrance hole has a ferromagnetic pole piece that extends into the chamber from the entrance hole to a continuing second face that extends radially across an inner pole of the entrance magnet ring.

Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO{sub 2} using cyclic Ar/C{sub 4}F{sub 8} plasma

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kawakami, Masatoshi; Metzler, Dominik; Oehrlein, Gottlieb S., E-mail: oehrlein@umd.edu

2016-07-15

The authors studied the effect of the temperature and chemical state of the chamber wall on process performance for atomic layer etching of SiO{sub 2} using a steady-state Ar plasma, periodic injection of a defined number of C{sub 4}F{sub 8} molecules, and synchronized plasma-based Ar{sup +} ion bombardment. To evaluate these effects, the authors measured the quartz coupling window temperature. The plasma gas phase chemistry was characterized using optical emission spectroscopy. It was found that although the thickness of the polymer film deposited in each cycle is constant, the etching behavior changed, which is likely related to a change inmore » the plasma gas phase chemistry. The authors found that the main gas phase changes occur after C{sub 4}F{sub 8} injection. The C{sub 4}F{sub 8} and the quartz window react and generate SiF and CO. The emission intensity changes with wall surface state and temperature. Therefore, changes in the plasma gas species generation can lead to a shift in etching performance during processing. During initial cycles, minimal etching is observed, while etching gradually increases with cycle number.« less

Improved Rhenium Thrust Chambers

NASA Technical Reports Server (NTRS)

O'Dell, John Scott

2015-01-01

Radiation-cooled bipropellant thrust chambers are being considered for ascent/ descent engines and reaction control systems on various NASA missions and spacecraft, such as the Mars Sample Return and Orion Multi-Purpose Crew Vehicle (MPCV). Currently, iridium (Ir)-lined rhenium (Re) combustion chambers are the state of the art for in-space engines. NASA's Advanced Materials Bipropellant Rocket (AMBR) engine, a 150-lbf Ir-Re chamber produced by Plasma Processes and Aerojet Rocketdyne, recently set a hydrazine specific impulse record of 333.5 seconds. To withstand the high loads during terrestrial launch, Re chambers with improved mechanical properties are needed. Recent electrochemical forming (EL-Form"TM") results have shown considerable promise for improving Re's mechanical properties by producing a multilayered deposit composed of a tailored microstructure (i.e., Engineered Re). The Engineered Re processing techniques were optimized, and detailed characterization and mechanical properties tests were performed. The most promising techniques were selected and used to produce an Engineered Re AMBR-sized combustion chamber for testing at Aerojet Rocketdyne.

Robust Low Cost Aerospike/RLV Combustion Chamber by Advanced Vacuum Plasma Process

NASA Technical Reports Server (NTRS)

Holmes, Richard; Ellis, David; McKechnie

1999-01-01

Next-generation, regeneratively cooled rocket engines will require materials that can withstand high temperatures while retaining high thermal conductivity. At the same time, fabrication techniques must be cost efficient so that engine components can be manufactured within the constraints of a shrinking NASA budget. In recent years, combustion chambers of equivalent size to the Aerospike chamber have been fabricated at NASA-Marshall Space Flight Center (MSFC) using innovative, relatively low-cost, vacuum-plasma-spray (VPS) techniques. Typically, such combustion chambers are made of the copper alloy NARloy-Z. However, current research and development conducted by NASA-Lewis Research Center (LeRC) has identified a Cu-8Cr-4Nb alloy which possesses excellent high-temperature strength, creep resistance, and low cycle fatigue behavior combined with exceptional thermal stability. In fact, researchers at NASA-LeRC have demonstrated that powder metallurgy (P/M) Cu-8Cr-4Nb exhibits better mechanical properties at 1,200 F than NARloy-Z does at 1,000 F. The objective of this program was to develop and demonstrate the technology to fabricate high-performance, robust, inexpensive combustion chambers for advanced propulsion systems (such as Lockheed-Martin's VentureStar and NASA's Reusable Launch Vehicle, RLV) using the low-cost, VPS process to deposit Cu-8Cr-4Nb with mechanical properties that match or exceed those of P/M Cu-8Cr-4Nb. In addition, oxidation resistant and thermal barrier coatings can be incorporated as an integral part of the hot wall of the liner during the VPS process. Tensile properties of Cu-8Cr-4Nb material produced by VPS are reviewed and compared to material produced previously by extrusion. VPS formed combustion chamber liners have also been prepared and will be reported on following scheduled hot firing tests at NASA-Lewis.

Plasma enhanced chemical vapor deposition (PECVD) method of forming vanadium oxide films and vanadium oxide thin-films prepared thereby

DOEpatents

Zhang, Ji-Guang; Tracy, C. Edwin; Benson, David K.; Turner, John A.; Liu, Ping

2000-01-01

A method is disclosed of forming a vanadium oxide film on a substrate utilizing plasma enhanced chemical vapor deposition. The method includes positioning a substrate within a plasma reaction chamber and then forming a precursor gas comprised of a vanadium-containing chloride gas in an inert carrier gas. This precursor gas is then mixed with selected amounts of hydrogen and oxygen and directed into the reaction chamber. The amounts of precursor gas, oxygen and hydrogen are selected to optimize the final properties of the vanadium oxide film An rf plasma is generated within the reaction chamber to chemically react the precursor gas with the hydrogen and the oxygen to cause deposition of a vanadium oxide film on the substrate while the chamber deposition pressure is maintained at about one torr or less. Finally, the byproduct gases are removed from the plasma reaction chamber.

Plasma fluorination of vertically aligned carbon nanotubes: functionalization and thermal stability.

PubMed

Struzzi, Claudia; Scardamaglia, Mattia; Hemberg, Axel; Petaccia, Luca; Colomer, Jean-François; Snyders, Rony; Bittencourt, Carla

2015-01-01

Grafting of fluorine species on carbon nanostructures has attracted interest due to the effective modification of physical and chemical properties of the starting materials. Various techniques have been employed to achieve a controlled fluorination yield; however, the effect of contaminants is rarely discussed, although they are often present. In the present work, the fluorination of vertically aligned multiwalled carbon nanotubes was performed using plasma treatment in a magnetron sputtering chamber with fluorine diluted in an argon atmosphere with an Ar/F2 ratio of 95:5. The effect of heavily diluted fluorine in the precursor gas mixture is investigated by evaluating the modifications in the nanotube structure and the electronic properties upon plasma treatment. The existence of oxygen-based grafted species is associated with background oxygen species present in the plasma chamber in addition to fluorine. The thermal stability and desorption process of the fluorine species grafted on the carbon nanotubes during the fluorine plasma treatment were evaluated by combining different spectroscopic techniques.

Tokamak reactor for treating fertile material or waste nuclear by-products

DOEpatents

Kotschenreuther, Michael T.; Mahajan, Swadesh M.; Valanju, Prashant M.

2012-10-02

Disclosed is a tokamak reactor. The reactor includes a first toroidal chamber, current carrying conductors, at least one divertor plate within the first toroidal chamber and a second chamber adjacent to the first toroidal chamber surrounded by a section that insulates the reactor from neutrons. The current carrying conductors are configured to confine a core plasma within enclosed walls of the first toroidal chamber such that the core plasma has an elongation of 1.5 to 4 and produce within the first toroidal chamber at least one stagnation point at a perpendicular distance from an equatorial plane through the core plasma that is greater than the plasma minor radius. The at least one divertor plate and current carrying conductors are configured relative to one another such that the current carrying conductors expand the open magnetic field lines at the divertor plate.

Plasma Propulsion Testing Capabilities at Arnold Engineering Development Center

NASA Technical Reports Server (NTRS)

Polzin, Kurt A.; Dawbarn, Albert; Moeller, Trevor

2007-01-01

This paper describes the results of a series of experiments aimed at quantifying the plasma propulsion testing capabilities of a 12-ft diameter vacuum facility (12V) at USAF-Arnold Engineering Development Center (AEDC). Vacuum is maintained in the 12V facility by cryogenic panels lining the interior of the chamber. The pumping capability of these panels was shown to be great enough to support plasma thrusters operating at input electrical power >20 kW. In addition, a series of plasma diagnostics inside the chamber allowed for measurement of plasma parameters at different spatial locations, providing information regarding the chamber's effect on the global plasma thruster flowfield. The plasma source used in this experiment was Hall thruster manufactured by Busek Co. The thruster was operated at up to 20 kW steady-state power in both a lower current and higher current mode. The vacuum level in the chamber never rose above 9 x 10(exp -6) torr during the course of testing. Langmuir probes, ion flux probes, and Faraday cups were used to quantify the plasma parameters in the chamber. We present the results of these measurements and estimates of pumping speed based on the background pressure level and thruster propellant mass flow rate.

Are ion acoustic waves supported by high-density plasmas in the Large Plasma Device (LaPD)?

NASA Astrophysics Data System (ADS)

Roycroft, Rebecca; Dorfman, Seth; Carter, Troy A.; Gekelman, Walter; Tripathi, Shreekrishna

2012-10-01

Ion acoustic waves are a type of longitudinal wave in a plasma, propagating though the motion of the ions. The wave plays a key role in a parametric decay process thought to be responsible for the spectrum of turbulence observed in the solar wind. In recent LaPD experiments aimed at studying this process, modes thought to be ion acoustic waves are strongly damped when the pump Alfven waves are turned off. This observation motivates an experiment focused on directly launching ion acoustic waves under similar conditions. Our first attempt to launch ion acoustic waves using a metal grid in the plasma was unsuccessful at high magnetic fields and densities due to electrons shorting out the bias applied between the grid and the wall. Results from a new device based on [1] to launch ion acoustic waves will be presented; this device will consist of a small chamber with a plasma source separated from the main chamber by two biased grids. The plasma created inside the small device will be held at a different potential from the main plasma; modulation of this difference should affect the ions, allowing ion acoustic waves to be launched and their properties compared to the prior LaPD experiments.[4pt] [1] W. Gekelman and R. L. Stenzel, Phys. Fluids 21, 2014 (1978).

Measurement of Debye length in laser-produced plasma.

NASA Technical Reports Server (NTRS)

Ehler, W.

1973-01-01

The Debye length of an expanded plasma created by placing an evacuated chamber with an entrance slit in the path of a freely expanding laser produced plasma was measured, using the slab geometry. An independent measurement of electron density together with the observed value for the Debye length also provided a means for evaluating the plasma electron temperature. This temperature has applications in ascertaining plasma conductivity and magnetic field necessary for confinement of the laser produced plasma. Also, the temperature obtained would be useful in analyzing electron-ion recombination rates in the expanded plasma and the dynamics of the cooling process of the plasma expansion.

Parametric investigations of plasma characteristics in a remote inductively coupled plasma system

NASA Astrophysics Data System (ADS)

Shukla, Prasoon; Roy, Abhra; Jain, Kunal; Bhoj, Ananth

2016-09-01

Designing a remote plasma system involves source chamber sizing, selection of coils and/or electrodes to power the plasma, designing the downstream tubes, selection of materials used in the source and downstream regions, locations of inlets and outlets and finally optimizing the process parameter space of pressure, gas flow rates and power delivery. Simulations can aid in spatial and temporal plasma characterization in what are often inaccessible locations for experimental probes in the source chamber. In this paper, we report on simulations of a remote inductively coupled Argon plasma system using the modeling platform CFD-ACE +. The coupled multiphysics model description successfully address flow, chemistry, electromagnetics, heat transfer and plasma transport in the remote plasma system. The SimManager tool enables easy setup of parametric simulations to investigate the effect of varying the pressure, power, frequency, flow rates and downstream tube lengths. It can also enable the automatic solution of the varied parameters to optimize a user-defined objective function, which may be the integral ion and radical fluxes at the wafer. The fast run time coupled with the parametric and optimization capabilities can add significant insight and value in design and optimization.

Boron hydride polymer coated substrates

DOEpatents

Pearson, R.K.; Bystroff, R.I.; Miller, D.E.

1986-08-27

A method is disclosed for coating a substrate with a uniformly smooth layer of a boron hydride polymer. The method comprises providing a reaction chamber which contains the substrate and the boron hydride plasma. A boron hydride feed stock is introduced into the chamber simultaneously with the generation of a plasma discharge within the chamber. A boron hydride plasma of ions, electrons and free radicals which is generated by the plasma discharge interacts to form a uniformly smooth boron hydride polymer which is deposited on the substrate.

Boron hydride polymer coated substrates

DOEpatents

Pearson, Richard K.; Bystroff, Roman I.; Miller, Dale E.

1987-01-01

A method is disclosed for coating a substrate with a uniformly smooth layer of a boron hydride polymer. The method comprises providing a reaction chamber which contains the substrate and the boron hydride plasma. A boron hydride feed stock is introduced into the chamber simultaneously with the generation of a plasma discharge within the chamber. A boron hydride plasma of ions, electrons and free radicals which is generated by the plasma discharge interacts to form a uniformly smooth boron hydride polymer which is deposited on the substrate.

Diesel NO(x) aftertreatment by combined process using temperature swing adsorption, NO(x) reduction by nonthermal plasma, and NO(x) recirculation: improvement of the recirculation process.

PubMed

Yoshida, Keiichiro; Kuwahara, Takuya; Kuroki, Tomoyuki; Okubo, Masaaki

2012-09-15

NO(x) emitted from a stationary diesel engine generator was treated with a hybrid system comprising NO(x) reduction by nonthermal plasma (NTP) and temperature swing adsorption (TSA) driven by engine waste heat. TSA produces a low-volume gas mixture of N(2) and highly concentrated NO(x), which is effectively reduced by NTP treatment. Improved treatment performance and efficiency are achieved by re-injecting the NTP-treated gas mixture into the engine intake. The system comprises two switchable adsorption chambers; the operation of this system was simulated by using a one-chamber system. The maximum energy efficiency for NO(x) treatment is 200 g(NO(2))/kWh. The respective contributions of NTP and injection of N(2) and NO(x) to the performance were theoretically analyzed. The analysis predicts that high energy efficiency and high NO(x)-removal efficiency can be simultaneously achieved with this system but miniaturization of the adsorption chambers will be a challenge. Copyright © 2012 Elsevier B.V. All rights reserved.

Application of Plasma Arcs to the to the Remediation of Shipboard Waste(Supported by ONR and NSWC.)

NASA Astrophysics Data System (ADS)

Giuliani, John L.

1996-10-01

The Naval Research Laboratory (B. Sartwell, (Chemistry Division NRL); J. Apruzese, (Plasma Physics Division NRL); S. Peterson, D. Counts, (Geo-Centers Inc.),and Q. Han (U. Minn.)) (NRL) is investigating the application of plasma arc technology for the on-board remediation of waste material generated by sea faring ships. A 150kW DC arc torch within a 1 meter diameter chamber has been used for the pyrolysis of liquid and solid material which simulate the waste stream from a naval ship. A general discussion of the materials treated and the associated problems arising from their pyrolysis in a plasma torch will be presented. The greatest challenge for a shipboard plasma remediation, including any exhaust gas treatment, is the overall size of the system imposed by the limited confines of a ship. Connected with this issue are choices of the arc configuration: transfered vs non-transfered; and the feed stock gas: reducing vs oxidizing. The research component of NRL's program is to characterize the gaseous by-products, the remnant slag, and the plasma arc through systematic experiments, as well as to model the plasma dynamics and chemistry within the chamber. The environment within the chamber is primarily defined by several temperature measurements. Two color pyrometry is used to determine the molten slag temperature ( ~2200 degK) and a suite of thermocouples within the chamber indicate a slighter cooler gas phase temperature. Synthetic spectra were generated from radiation transport calculations and compared with optical emission spectroscopy to map the gas temperature around the plasma arc itself ( ~ 5000 degK). Spectroscopy offers the potential of a non-invasive diagnostic to eventually be used for on-line process control, a necessary feature for an operating system due to the heterogeneous waste stream. Other studies will be described including the addition of O2 through a ring to achieve combustion of hydrocarbon wastes, residual gas analysis of the exhaust for different waste material, the voltage-current characteristic at various plasma arc lengths to estimate plasma conductivity, and the surface shape of the molten slag given the pitch and roll of a ship.

RF Sputtering for preparing substantially pure amorphous silicon monohydride

DOEpatents

Jeffrey, Frank R.; Shanks, Howard R.

1982-10-12

A process for controlling the dihydride and monohydride bond densities in hydrogenated amorphous silicon produced by reactive rf sputtering of an amorphous silicon target. There is provided a chamber with an amorphous silicon target and a substrate therein with the substrate and the target positioned such that when rf power is applied to the target the substrate is in contact with the sputtering plasma produced thereby. Hydrogen and argon are fed to the chamber and the pressure is reduced in the chamber to a value sufficient to maintain a sputtering plasma therein, and then rf power is applied to the silicon target to provide a power density in the range of from about 7 watts per square inch to about 22 watts per square inch to sputter an amorphous silicon hydride onto the substrate, the dihydride bond density decreasing with an increase in the rf power density. Substantially pure monohydride films may be produced.

Method and apparatus for charged particle propagation

DOEpatents

Hershcovitch, A.

1996-11-26

A method and apparatus are provided for propagating charged particles from a vacuum to a higher pressure region. A generator includes an evacuated chamber having a gun for discharging a beam of charged particles such as an electron beam or ion beam. The beam is discharged through a beam exit in the chamber into a higher pressure region. A plasma interface is disposed at the beam exit and includes a plasma channel for bounding a plasma maintainable between a cathode and an anode disposed at opposite ends thereof. The plasma channel is coaxially aligned with the beam exit for propagating the beam from the chamber, through the plasma, and into the higher pressure region. The plasma is effective for pumping down the beam exit for preventing pressure increase in the chamber and provides magnetic focusing of the beam discharged into the higher pressure region 24. 7 figs.

Role of electron temperature on charging of dust grains

NASA Astrophysics Data System (ADS)

Kausik, S. S.; Chakraborty, M.; Saikia, B. K.

2007-02-01

Dust grains are produced by evaporation of silver in an experimental setup consisting of a dust chamber, a plasma chamber, and a deflection chamber. Due to differential pressure between the dust and plasma chambers, the dust grains move upward and after passing through plasma they become negatively charged. These charged dust grains are then deflected by a dc field applied across a pair of deflector plates in the deflection chamber. Both from the amount of deflection and also from the floating potential, the number of charges collected on the dust grains is calculated. As the gas pressure is changed, the plasma density and the electron temperature changes. Dust charge is then calculated at each value of pressure from the deflection and floating potential. It is found that the electron temperature has a profound effect in the accumulation of charge on dust grains.

ECR ion source with electron gun

DOEpatents

Xie, Z.Q.; Lyneis, C.M.

1993-10-26

An Advanced Electron Cyclotron Resonance ion source having an electron gun for introducing electrons into the plasma chamber of the ion source is described. The ion source has a injection enclosure and a plasma chamber tank. The plasma chamber is defined by a plurality of longitudinal magnets. The electron gun injects electrons axially into the plasma chamber such that ionization within the plasma chamber occurs in the presence of the additional electrons produced by the electron gun. The electron gun has a cathode for emitting electrons therefrom which is heated by current supplied from an AC power supply while bias potential is provided by a bias power supply. A concentric inner conductor and outer conductor carry heating current to a carbon chuck and carbon pusher which hold the cathode in place and also heat the cathode. In the Advanced Electron Cyclotron Resonance ion source, the electron gun replaces the conventional first stage used in prior electron cyclotron resonance ion generators. 5 figures.

VPS GRCop-84 Liner Development Efforts

NASA Technical Reports Server (NTRS)

Elam, Sandra K.; Holmes, Richard; McKechnie, Tim; Hickman, Robert; Pickens, Tim

2003-01-01

For the past several years, NASA's Marshall Space Flight Center (MSFC) has been working with Plasma Processes, Inc. (PPI) to fabricate combustion chamber liners using the Vacuum Plasma Spray (VPS) process. Multiple liners of a variety of shapes and sizes have been created. Each liner has been fabricated with GRCop-84 (a copper alloy with chromium and niobium) and a functional gradient coating (FGC) on the hot wall. While the VPS process offers versatility and a reduced fabrication schedule, the material system created with VPS allows the liners to operate at higher temperatures, with maximum blanch resistance and improved cycle life. A subscal unit (5K lbf thrust class) is being cycle tested in a LOX/Hydrogen thrust chamber assembly at MSFC. To date, over 75 hot-fire tests have been accumulated on this article. Tests include conditions normally detrimental to conventional materials, yet the VPS GRCop-84 liner has yet to show any signs of degradation. A larger chamber (15K lbf thrust class) has also been fabricated and is being prepared for hot-fire testing at MSFC near the end of 2003. Linear liners have been successfully created to further demonstrate the versatility of the process. Finally, scale up issues for the VPS process are being tackled with efforts to fabricate a full size, engine class liner. Specifically, a liner for the SSME's Main Combustion Chamber (MCC) has recently been attempted. The SSME size was chosen for convenience, since its design was readily available and its size was sufficient to tackle specific issues. Efforts to fabricate these large liners have already provided valuable lessons for using this process for engine programs. The material quality for these large units is being evaluated with destructive analysis and these results will be available by the end of 2003.

Deposition of diamond-like films by ECR microwave plasma

NASA Technical Reports Server (NTRS)

Shing, Yuh-Han (Inventor); Pool, Frederick S. (Inventor)

1995-01-01

Hard amorphous hydrogenated carbon, diamond-like films are deposited using an electron cyclotron resonance microwave plasma with a separate radio frequency power bias applied to a substrate stage. The electron cyclotron resonance microwave plasma yields low deposition pressure and creates ion species otherwise unavailable. A magnetic mirror configuration extracts special ion species from a plasma chamber. Different levels of the radio frequency power bias accelerate the ion species of the ECR plasma impinging on a substrate to form different diamond-like films. During the deposition process, a sample stage is maintained at an ambient temperature of less than 100.degree. C. No external heating is applied to the sample stage. The deposition process enables diamond-like films to be deposited on heat-sensitive substrates.

Plasma-Induced, Self-Masking, One-Step Approach to an Ultrabroadband Antireflective and Superhydrophilic Subwavelength Nanostructured Fused Silica Surface.

PubMed

Ye, Xin; Shao, Ting; Sun, Laixi; Wu, Jingjun; Wang, Fengrui; He, Junhui; Jiang, Xiaodong; Wu, Wei-Dong; Zheng, Wanguo

2018-04-25

In this work, antireflective and superhydrophilic subwavelength nanostructured fused silica surfaces have been created by one-step, self-masking reactive ion etching (RIE). Bare fused silica substrates with no mask were placed in a RIE vacuum chamber, and then nanoscale fluorocarbon masks and subwavelength nanostructures (SWSs) automatically formed on these substrate after the appropriate RIE plasma process. The mechanism of plasma-induced self-masking SWS has been proposed in this paper. Plasma parameter effects on the morphology of SWS have been investigated to achieve perfect nanocone-like SWS for excellent antireflection, including process time, reactive gas, and pressure of the chamber. Optical properties, i.e., antireflection and optical scattering, were simulated by the finite difference time domain (FDTD) method. Calculated data agree well with the experiment results. The optimized SWS show ultrabroadband antireflective property (up to 99% from 500 to 1360 nm). An excellent improvement of transmission was achieved for the deep-ultraviolet (DUV) range. The proposed low-cost, highly efficient, and maskless method was applied to achieve ultrabroadband antireflective and superhydrophilic SWSs on a 100 mm optical window, which promises great potential for applications in the automotive industry, goggles, and optical devices.

Method for plasma formation for extreme ultraviolet lithography-theta pinch

DOEpatents

Hassanein, Ahmed [Naperville, IL; Konkashbaev, Isak [Bolingbrook, IL; Rice, Bryan [Hillsboro, OR

2007-02-20

A device and method for generating extremely short-wave ultraviolet electromagnetic wave, utilizing a theta pinch plasma generator to produce electromagnetic radiation in the range of 10 to 20 nm. The device comprises an axially aligned open-ended pinch chamber defining a plasma zone adapted to contain a plasma generating gas within the plasma zone; a means for generating a magnetic field radially outward of the open-ended pinch chamber to produce a discharge plasma from the plasma generating gas, thereby producing a electromagnetic wave in the extreme ultraviolet range; a collecting means in optical communication with the pinch chamber to collect the electromagnetic radiation; and focusing means in optical communication with the collecting means to concentrate the electromagnetic radiation.

Apparatus and method for stabilization or oxidation of polymeric materials

DOEpatents

Paulauskas, Felix L [Knoxville, TN; Sherman, Daniel M [Knoxville, TN

2010-01-19

An apparatus for treating polymeric materials comprises a treatment chamber adapted to maintain a selected atmosphere at a selected temperature; a means for supporting the polymeric material within the chamber; and, a source of ozone-containing gas, which decomposes at the selected temperature yielding at least one reactive oxidative species whereby the polymer is stabilized and cross linked through exposure to the oxidative species in the chamber at the selected temperature. The ozone may be generated by a plasma discharge or by various chemical processes. The apparatus may be configured for either batch-type or continuous-type processing. The apparatus and method are especially useful for preparing polymer fibers, particularly PAN fibers, for later carbonization treatments as well as to make flame-retardant fabrics.

Comparison of Plasma Polymerization under Collisional and Collision-Less Pressure Regimes.

PubMed

Saboohi, Solmaz; Jasieniak, Marek; Coad, Bryan R; Griesser, Hans J; Short, Robert D; Michelmore, Andrew

2015-12-10

While plasma polymerization is used extensively to fabricate functionalized surfaces, the processes leading to plasma polymer growth are not yet completely understood. Thus, reproducing processes in different reactors has remained problematic, which hinders industrial uptake and research progress. Here we examine the crucial role pressure plays in the physical and chemical processes in the plasma phase, in interactions at surfaces in contact with the plasma phase, and how this affects the chemistry of the resulting plasma polymer films using ethanol as the gas precursor. Visual inspection of the plasma reveals a change from intense homogeneous plasma at low pressure to lower intensity bulk plasma at high pressure, but with increased intensity near the walls of the chamber. It is demonstrated that this occurs at the transition from a collision-less to a collisional plasma sheath, which in turn increases ion and energy flux to surfaces at constant RF power. Surface analysis of the resulting plasma polymer films show that increasing the pressure results in increased incorporation of oxygen and lower cross-linking, parameters which are critical to film performance. These results and insights help to explain the considerable differences in plasma polymer properties observed by different research groups using nominally similar processes.

Plasma & reactive ion etching to prepare ohmic contacts

DOEpatents

Gessert, Timothy A.

2002-01-01

A method of making a low-resistance electrical contact between a metal and a layer of p-type CdTe surface by plasma etching and reactive ion etching comprising: a) placing a CdS/CdTe layer into a chamber and evacuating said chamber; b) backfilling the chamber with Argon or a reactive gas to a pressure sufficient for plasma ignition; and c) generating plasma ignition by energizing a cathode which is connected to a power supply to enable the plasma to interact argon ions alone or in the presence of a radio-frequency DC self-bias voltage with the p-CdTe surface.

Gas and plasma dynamics of RF discharge jet of low pressure in a vacuum chamber with flat electrodes and inside tube, influence of RF discharge on the steel surface parameters

NASA Astrophysics Data System (ADS)

Khristoliubova, V. I.; Kashapov, N. F.; Shaekhov, M. F.

2016-06-01

Researches results of the characteristics of the RF discharge jet of low pressure and the discharge influence on the surface modification of high speed and structural steels are introduced in the article. Gas dynamics, power and energy parameters of the RF low pressure discharge flow in the discharge chamber and the electrode gap are studied in the presence of the materials. Plasma flow rate, discharge power, the concentration of electrons, the density of RF power, the ion current density, and the energy of the ions bombarding the surface materials are considered for the definition of basic properties crucial for the process of surface modification of materials as they were put in the plasma jet. The influence of the workpiece and effect of products complex configuration on the RF discharge jet of low pressure is defined. The correlation of the input parameters of the plasma unit on the characteristics of the discharge is established.

Enhancement of negative hydrogen ion production in an electron cyclotron resonance source

NASA Astrophysics Data System (ADS)

Dugar-Zhabon, V. D.; Murillo, M. T.; Karyaka, V. I.

2013-07-01

In this paper, we present a method for improving the negative hydrogen ion yield in the electron cyclotron resonance source with driven plasma rings where the negative ion production is realized in two stages. First, the hydrogen and deuterium molecules are excited in collisions with plasma electrons to high-laying Rydberg and high vibration levels in the plasma volume. The second stage leads to negative ion production through the process of repulsive attachment of low-energy electrons by the excited molecules. The low-energy electrons originate due to a bombardment of the plasma electrode surface by ions of a driven ring and the thermoelectrons produced by a rare earth ceramic electrode, which is appropriately installed in the source chamber. The experimental and calculation data on the negative hydrogen ion generation rate demonstrate that very low-energy thermoelectrons significantly enhance the negative-ion generation rate that occurs in the layer adjacent to the plasma electrode surface. It is found that heating of the tungsten filaments placed in the source chamber improves the discharge stability and extends the pressure operation range.

Major Disruptions and Other Issues Driving the Design of the Ignitor Plasma Chamber

NASA Astrophysics Data System (ADS)

Ramogida, G.; Frosi, P.; Coppi, B.

2012-10-01

The Plasma Chamber of the Ignitor machine is designed according to the information available about electromagnetic loads coming from the experimental knowledge and the increasingly accurate numerical models of the eddy and halo currents resulting from the worst disruption events in existing machines. The developed models deal with static, dynamic and modal analysis. The loads during nominal operations and also those arising from plasma disruptions, by far the most important ones, have been taken into account, as well as the design problems arising from the Mo tiles in the inboard edge of the vacuum vessel, the Faraday shields covering the 6 ports devoted to the ICRH system and, finally, the reaction forces coming from the regions of constraints with the C-Clamps (the retaining structure that support the plasma chamber both statically and dynamically). The plasma chamber has to perform several additional functions, such as to keep the vacuum, be bakeable, and support the set of plates that carry the Mo tiles facing the plasma column. According to the present design the chamber is made of Inconel and has a thickness varying from 26 to 52 mm.

Plasma Perturbations in High-Speed Probing of Hall Thruster Discharge Chambers: Quantification and Mitigation

NASA Technical Reports Server (NTRS)

Jorns, Benjamin A.; Goebel, Dan M.; Hofer, Richard R.

2015-01-01

An experimental investigation is presented to quantify the effect of high-speed probing on the plasma parameters inside the discharge chamber of a 6-kW Hall thruster. Understanding the nature of these perturbations is of significant interest given the importance of accurate plasma measurements for characterizing thruster operation. An array of diagnostics including a high-speed camera and embedded wall probes is employed to examine in real time the changes in electron temperature and plasma potential induced by inserting a high-speed reciprocating Langmuir probe into the discharge chamber. It is found that the perturbations onset when the scanning probe is downstream of the electron temperature peak, and that along channel centerline, the perturbations are best characterized as a downstream shift of plasma parameters by 15-20% the length of the discharge chamber. A parametric study is performed to investigate techniques to mitigate the observed probe perturbations including varying probe speed, probe location, and operating conditions. It is found that the perturbations largely disappear when the thruster is operated at low power and low discharge voltage. The results of this mitigation study are discussed in the context of recommended methods for generating unperturbed measurements of the discharge chamber plasma.

Plasma processes in inert gas thrusters

NASA Technical Reports Server (NTRS)

Kaufman, H. R.; Robinson, R. S.

1979-01-01

Inert gas thrusters, particularly with large diameters, have continued to be of interest for space propulsion applications. Two plasma processes are treated in this study: electron diffusion across magnetic fields and double ion production in inert-gas thrusters. A model is developed to describe electron diffusion across a magnetic field that is driven by both density and potential gradients, with Bohm diffusion used to predict the diffusion rate. This model has applications to conduction across magnetic fields inside a discharge chamber, as well as through a magnetic baffle region used to isolate a hollow cathode from the main chamber. A theory for double ion production is presented, which is not as complete as the electron diffusion theory described, but it should be a useful tool for predicting double ion sputter erosion. Correlations are developed that may be used, without experimental data, to predict double ion densities for the design of new and especially larger ion thrusters.

Heated probe diagnostic inside of the gas aggregation nanocluster source

NASA Astrophysics Data System (ADS)

Kolpakova, Anna; Shelemin, Artem; Kousal, Jaroslav; Kudrna, Pavel; Tichy, Milan; Biederman, Hynek; Surface; Plasma Science Team

2016-09-01

Gas aggregation cluster sources (GAS) usually operate outside common working conditions of most magnetrons and the size of nanoparticles created in GAS is below that commonly studied in dusty plasmas. Therefore, experimental data obtained inside the GAS are important for better understanding of process of nanoparticles formation. In order to study the conditions inside the gas aggregation chamber, special ``diagnostic GAS'' has been constructed. It allows simultaneous monitoring (or spatial profiling) by means of optical emission spectroscopy, mass spectrometry and probe diagnostic. Data obtained from Langmuir and heated probes map the plasma parameters in two dimensions - radial and axial. Titanium has been studied as an example of metal for which the reactive gas in the chamber starts nanoparticles production. Three basic situations were investigated: sputtering from clean titanium target in argon, sputtering from partially pre-oxidized target and sputtering with oxygen introduced into the discharge. It was found that during formation of nanoparticles the plasma parameters differ strongly from the situation without nanoparticles. These experimental data will support the efforts of more realistic modeling of the process. Czech Science Foundation 15-00863S.

ECR ion source with electron gun

DOEpatents

Xie, Zu Q.; Lyneis, Claude M.

1993-01-01

An Advanced Electron Cyclotron Resonance ion source (10) having an electron gun (52) for introducing electrons into the plasma chamber (18) of the ion source (10). The ion source (10) has a injection enclosure (12) and a plasma chamber tank (14). The plasma chamber (18) is defined by a plurality of longitudinal magnets (16). The electron gun (52) injects electrons axially into the plasma chamber (18) such that ionization within the plasma chamber (18) occurs in the presence of the additional electrons produced by the electron gun (52). The electron gun (52) has a cathode (116) for emitting electrons therefrom which is heated by current supplied from an AC power supply (96) while bias potential is provided by a bias power supply (118). A concentric inner conductor (60) and Outer conductor (62) carry heating current to a carbon chuck (104) and carbon pusher (114) Which hold the cathode (116) in place and also heat the cathode (16). In the Advanced Electron Cyclotron Resonance ion source (10), the electron gun (52) replaces the conventional first stage used in prior art electron cyclotron resonance ion generators.

A Contemporary Concept of the Blood-Aqueous Barrier

PubMed Central

Freddo, Thomas F.

2012-01-01

This review traces the evolution of the concept of the blood-aqueous barrier (BAB) during the past 20 years. The classical model simply stipulated that the tight junctions of the iris vasculature and ciliary epithelium excluded plasma proteins from the aqueous humor (AH). It failed to reconcile the presence of AH protein levels equal to 1% of that found in plasma. Moreover, models of barrier kinetics assumed that the processes of AH secretion and plasma protein entry were directly linked. Thus, elevations of AH protein levels could only be explained by a pathological breakdown of the BAB. Over the last 20 years it has been shown that the plasma proteins in normal AH by-pass the posterior chamber entirely. Instead, these proteins diffuse from the capillaries of ciliary body stroma, into the iris stroma and then into the anterior chamber. This creates a reservoir of plasma-proteins in the iris stroma that is not derived from the iris vessels. This reservoir is prevented from diffusing posteriorly by tight junctions in the posterior iris epithelium. The one-way valve created by the pupil resting on the anterior lens capsule, combined with the continuous, forward flow of AH through the pupil, prevents protein reflux into the posterior chamber. Importantly, in the new paradigm, secretion of AH and the entry of plasma proteins into AH, are semi-independent events. This opens the possibility that AH protein levels could increase in the absence of breakdown of the BAB. Clinical consequences of this new paradigm of the BAB are discussed. PMID:23128417

A contemporary concept of the blood-aqueous barrier.

PubMed

Freddo, Thomas F

2013-01-01

This review traces the evolution of the concept of the blood-aqueous barrier (BAB) during the past 20 years. The Classical model simply stipulated that the tight junctions of the iris vasculature and ciliary epithelium excluded plasma proteins from the aqueous humor (AH). It failed to reconcile the presence of AH protein levels equal to 1% of that found in plasma. Moreover, models of barrier kinetics assumed that the processes of AH secretion and plasma protein entry were directly linked. Thus, elevations of AH protein levels could only be explained by a pathological breakdown of the BAB. Over the last 20 years it has been shown that the plasma proteins in normal AH by-pass the posterior chamber entirely. Instead, these proteins diffuse from the capillaries of ciliary body stroma, into the iris stroma and then into the anterior chamber. This creates a reservoir of plasma-proteins in the iris stroma that is not derived from the iris vessels. This reservoir is prevented from diffusing posteriorly by tight junctions in the posterior iris epithelium. The one-way valve created by the pupil resting on the anterior lens capsule, combined with the continuous, forward flow of AH through the pupil, prevents protein reflux into the posterior chamber. Importantly, in the new paradigm, secretion of AH and the entry of plasma proteins into AH, are semi-independent events. This opens the possibility that AH protein levels could increase in the absence of breakdown of the BAB. Clinical consequences of this new paradigm of the BAB are discussed. Copyright © 2012 Elsevier Ltd. All rights reserved.

Very low pressure high power impulse triggered magnetron sputtering

DOEpatents

Anders, Andre; Andersson, Joakim

2013-10-29

A method and apparatus are described for very low pressure high powered magnetron sputtering of a coating onto a substrate. By the method of this invention, both substrate and coating target material are placed into an evacuable chamber, and the chamber pumped to vacuum. Thereafter a series of high impulse voltage pulses are applied to the target. Nearly simultaneously with each pulse, in one embodiment, a small cathodic arc source of the same material as the target is pulsed, triggering a plasma plume proximate to the surface of the target to thereby initiate the magnetron sputtering process. In another embodiment the plasma plume is generated using a pulsed laser aimed to strike an ablation target material positioned near the magnetron target surface.

Method and apparatus for monitoring plasma processing operations

DOEpatents

Smith, Jr., Michael Lane; Stevenson, Joel O'Don; Ward, Pamela Peardon Denise

2001-01-01

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

Method and apparatus for monitoring plasma processing operations

DOEpatents

Smith, Jr., Michael Lane; Stevenson, Joel O'Don; Ward, Pamela Peardon Denise

2001-01-01

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discemible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

Method and apparatus for monitoring plasma processing operations

DOEpatents

Smith, Jr., Michael Lane; Stevenson, Joel O'Don; Ward, Pamela Peardon Denise

2000-01-01

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

Method and apparatus for monitoring plasma processing operations

DOEpatents

Smith, Jr., Michael Lane; Stevenson, Joel O'Don; Ward, Pamela Peardon Denise

2002-07-16

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). A final aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system.

Real time closed loop control of an Ar and Ar/O2 plasma in an ICP

NASA Astrophysics Data System (ADS)

Faulkner, R.; Soberón, F.; McCarter, A.; Gahan, D.; Karkari, S.; Milosavljevic, V.; Hayden, C.; Islyaikin, A.; Law, V. J.; Hopkins, M. B.; Keville, B.; Iordanov, P.; Doherty, S.; Ringwood, J. V.

2006-10-01

Real time closed loop control for plasma assisted semiconductor manufacturing has been the subject of academic research for over a decade. However, due to process complexity and the lack of suitable real time metrology, progress has been elusive and genuine real time, multi-input, multi-output (MIMO) control of a plasma assisted process has yet to be successfully implemented in an industrial setting. A Splasma parameter control strategy T is required to be adopted whereby process recipes which are defined in terms of plasma properties such as critical species densities as opposed to input variables such as rf power and gas flow rates may be transferable between different chamber types. While PIC simulations and multidimensional fluid models have contributed considerably to the basic understanding of plasmas and the design of process equipment, such models require a large amount of processing time and are hence unsuitable for testing control algorithms. In contrast, linear dynamical empirical models, obtained through system identification techniques are ideal in some respects for control design since their computational requirements are comparatively small and their structure facilitates the application of classical control design techniques. However, such models provide little process insight and are specific to an operating point of a particular machine. An ideal first principles-based, control-oriented model would exhibit the simplicity and computational requirements of an empirical model and, in addition, despite sacrificing first principles detail, capture enough of the essential physics and chemistry of the process in order to provide reasonably accurate qualitative predictions. This paper will discuss the development of such a first-principles based, control-oriented model of a laboratory inductively coupled plasma chamber. The model consists of a global model of the chemical kinetics coupled to an analytical model of power deposition. Dynamics of actuators including mass flow controllers and exhaust throttle are included and sensor characteristics are also modelled. The application of this control-oriented model to achieve multivariable closed loop control of specific species e.g. atomic Oxygen and ion density using the actuators rf power, Oxygen and Argon flow rates, and pressure/exhaust flow rate in an Ar/O2 ICP plasma will be presented.

Current-voltage characteristics of a cathodic plasma contactor with discharge chamber for application in electrodynamic tether propulsion

NASA Astrophysics Data System (ADS)

Xie, Kan; Martinez, Rafael A.; Williams, John D.

2014-04-01

This paper focuses on the net electron-emission current as a function of bias voltage of a plasma source that is being used as the cathodic element in a bare electrodynamic tether system. An analysis is made that enables an understanding of the basic issues determining the current-voltage (C-V) behaviour. This is important for the efficiency of the electrodynamic tether and for low impedance performance without relying on the properties of space plasma for varying orbital altitudes, inclinations, day-night cycles or the position of the plasma contactor relative to the wake of the spacecraft. The cathodic plasma contactor considered has a cylindrical discharge chamber (10 cm in diameter and ˜11 cm in length) and is driven by a hollow cathode. Experiments and a 1D spherical model are both used to study the contactor's C-V curves. The experiments demonstrate how the cathodic contactor would emit electrons into space for anode voltages in the range of 25-40 V, discharge currents in the range of 1-2.5 A, and low xenon gas flows of 2-4 sccm. Plasma properties are measured and compared with (3 A) and without net electron emission. A study of the dependence of relevant parameters found that the C-V behaviour strongly depends on electron temperature, initial ion energy and ion emission current at the contactor exit. However, it depended only weakly on ambient plasma density. The error in the developed model compared with the experimental C-V curves is within 5% at low electron-emission currents (0-2 A). The external ionization processes and high ion production rate caused by the discharge chamber, which dominate the C-V behaviour at electron-emission currents over 2 A, are further highlighted and discussed.

Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP

NASA Astrophysics Data System (ADS)

Lee, Jaewon; Kim, Kyung-Hyun; Chung, Chin-Wook

2017-02-01

The remote plasma has been generally used as the auxiliary plasma source for indirect plasma processes such as cleaning or ashing. When tandem plasma sources that contain main and remote plasma sources are discharged, the main plasma is affected by the remote plasma and vice versa. Charged particles can move between two chambers due to the potential difference between the two plasmas. For this reason, the electron energy possibility function of the main plasma can be controlled by adjusting the remote plasma state. In our study, low energy electrons in the main plasma are effectively heated with varying remote plasma powers, and high energy electrons which overcome potential differences between two plasmas—are exchanged with no remarkable change in the plasma density and the effective electron temperature.

High Power Helicon Plasma Source for Plasma Processing

NASA Astrophysics Data System (ADS)

Prager, James; Ziemba, Timothy; Miller, Kenneth E.

2015-09-01

Eagle Harbor Technologies (EHT), Inc. is developing a high power helicon plasma source. The high power nature and pulsed neutral gas make this source unique compared to traditional helicon source. These properties produce a plasma flow along the magnetic field lines, and therefore allow the source to be decoupled from the reaction chamber. Neutral gas can be injected downstream, which allows for precision control of the ion-neutral ratio at the surface of the sample. Although operated at high power, the source has demonstrated very low impurity production. This source has applications to nanoparticle productions, surface modification, and ionized physical vapor deposition.

RF sputtering for controlling dihydride and monohydride bond densities in amorphous silicon hydride

DOEpatents

Jeffery, F.R.; Shanks, H.R.

1980-08-26

A process is described for controlling the dihydride and monohydride bond densities in hydrogenated amorphous silicone produced by reactive rf sputtering of an amorphous silicon target. There is provided a chamber with an amorphous silicon target and a substrate therein with the substrate and the target positioned such that when rf power is applied to the target the substrate is in contact with the sputtering plasma produced thereby. Hydrogen and argon are fed to the chamber and the pressure is reduced in the chamber to a value sufficient to maintain a sputtering plasma therein, and then rf power is applied to the silicon target to provide a power density in the range of from about 7 watts per square inch to about 22 watts per square inch to sputter an amorphous solicone hydride onto the substrate, the dihydride bond density decreasing with an increase in the rf power density. Substantially pure monohydride films may be produced.

Fast quench reactor method

DOEpatents

Detering, B.A.; Donaldson, A.D.; Fincke, J.R.; Kong, P.C.; Berry, R.A.

1999-08-10

A fast quench reaction includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a means of rapidly expanding a reactant stream, such as a restrictive convergent-divergent nozzle at its outlet end. Metal halide reactants are injected into the reactor chamber. Reducing gas is added at different stages in the process to form a desired end product and prevent back reactions. The resulting heated gaseous stream is then rapidly cooled by expansion of the gaseous stream. 8 figs.

Fast quench reactor method

DOEpatents

Detering, Brent A.; Donaldson, Alan D.; Fincke, James R.; Kong, Peter C.; Berry, Ray A.

1999-01-01

A fast quench reaction includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a means of rapidly expanding a reactant stream, such as a restrictive convergent-divergent nozzle at its outlet end. Metal halide reactants are injected into the reactor chamber. Reducing gas is added at different stages in the process to form a desired end product and prevent back reactions. The resulting heated gaseous stream is then rapidly cooled by expansion of the gaseous stream.

Method and apparatus for charged particle propagation

DOEpatents

Hershcovitch, Ady

1996-11-26

A method and apparatus are provided for propagating charged particles from a vacuum to a higher pressure region. A generator 14,14b includes an evacuated chamber 16a,b having a gun 18,18b for discharging a beam of charged particles such as an electron beam 12 or ion beam 12b. The beam 12,12b is discharged through a beam exit 22 in the chamber 16a,b into a higher pressure region 24. A plasma interface 34 is disposed at the beam exit 22 and includes a plasma channel 38 for bounding a plasma 40 maintainable between a cathode 42 and an anode 44 disposed at opposite ends thereof. The plasma channel 38 is coaxially aligned with the beam exit 22 for propagating the beam 12,12b from the chamber 16a,b, through the plasma 40, and into the higher pressure region 24. The plasma 40 is effective for pumping down the beam exit 22 for preventing pressure increase in the chamber 16a,b, and provides magnetic focusing of the beam 12,12b discharged into the higher pressure region 24.

The Dartmouth Elephant plasma facility

NASA Astrophysics Data System (ADS)

Lynch, K. A.

2017-12-01

The Elephant facility in the Dartmouth Dept of Physics and Astronomyis a 1m by 2m chamber with a microwave-resonant plasma source togetherwith a higher energy electron/ion electrostatic gun. In this chamber weaim to re-create features of the auroral ionosphere including both thethermal plasma background, and the precipitating energetic auroral beam.We can manipulate the position and attitude of various sensors withinthe chamber and monitor their response to the various sources. Recentefforts have focussed on the sheath environment near and around thermalion RPA sensors and the small payloads which carry them into theionosphere.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Bowman, Adam J.; Scherrer, Joseph R.; Reiserer, Ronald S., E-mail: ron.reiserer@vanderbilt.edu

We present a simple apparatus for improved surface modification of polydimethylsiloxane (PDMS) microfluidic devices. A single treatment chamber for plasma activation and chemical/physical vapor deposition steps minimizes the time-dependent degradation of surface activation that is inherent in multi-chamber techniques. Contamination and deposition irregularities are also minimized by conducting plasma activation and treatment phases in the same vacuum environment. An inductively coupled plasma driver allows for interchangeable treatment chambers. Atomic force microscopy confirms that silane deposition on PDMS gives much better surface quality than standard deposition methods, which yield a higher local roughness and pronounced irregularities in the surface.

Time-Resolved Quantum Cascade Laser Absorption Spectroscopy of Pulsed Plasma Assisted Chemical Vapor Deposition Processes Containing BCl3

NASA Astrophysics Data System (ADS)

Lang, Norbert; Hempel, Frank; Strämke, Siegfried; Röpcke, Jürgen

2011-08-01

In situ measurements are reported giving insight into the plasma chemical conversion of the precursor BCl3 in industrial applications of boriding plasmas. For the online monitoring of its ground state concentration, quantum cascade laser absorption spectroscopy (QCLAS) in the mid-infrared spectral range was applied in a plasma assisted chemical vapor deposition (PACVD) reactor. A compact quantum cascade laser measurement and control system (Q-MACS) was developed to allow a flexible and completely dust-sealed optical coupling to the reactor chamber of an industrial plasma surface modification system. The process under the study was a pulsed DC plasma with periodically injected BCl3 at 200 Pa. A synchronization of the Q-MACS with the process control unit enabled an insight into individual process cycles with a sensitivity of 10-6 cm-1·Hz-1/2. Different fragmentation rates of the precursor were found during an individual process cycle. The detected BCl3 concentrations were in the order of 1014 molecules·cm-3. The reported results of in situ monitoring with QCLAS demonstrate the potential for effective optimization procedures in industrial PACVD processes.

Experiment and theoretical study of the propagation of high power microwave pulse in air breakdown environment

NASA Technical Reports Server (NTRS)

Kuo, S. P.; Ren, A.; Zhang, Y. S.

1991-01-01

In the study of the propagation of high power microwave pulse, one of the main concerns is how to minimize the energy loss of the pulse before reaching the destination. In the very high power region, one has to prevent the cutoff reflection caused by the excessive ionization in the background air. A frequency auto-conversion process which can lead to reflectionless propagation of powerful EM pulses in self-generated plasmas is studied. The theory shows that under the proper conditions the carrier frequency, omega, of the pulse will indeed shift upward with the growth of plasma frequency, omega(sub pe). Thus, the plasma during breakdown will always remain transparent to the pulse (i.e., omega greater than omega(sub pe)). A chamber experiment to demonstrate the frequency auto-conversion during the pulse propagation through the self-generated plasma is then conducted in a chamber. The detected frequency shift is compared with the theoretical result calculated y using the measured electron density distribution along the propagation path of the pulse. Good agreement between the theory and the experiment results is obtained.

Vacuum Plasma Spraying Replaces Electrodeposition

NASA Technical Reports Server (NTRS)

Holmes, Richard R.; Power, Chris; Burns, David H.; Daniel, Ron; Mckechnie, Timothy N.

1992-01-01

Vacuum plasma spraying used to fabricate large parts with complicated contours and inner structures, without uninspectable welds. Reduces time, and expense of fabrication. Wall of combustion chamber built up inside of outer nickel-alloy jacket by plasma spraying. Particles of metal sprayed partially melted in plasma gun and thrown at supersonic speed toward deposition surface. Vacuum plasma-spray produces stronger bond between the grooves and covering layer completing channels and wall of combustion chamber. In tests, bond withstood pressure of 20 kpsi, three times allowable limit by old method.

An Analytic Model for the Compression of Plasma Toroids

DTIC Science & Technology

1990-10-01

chamber are only 18 cm apart in the formation section, and the total chamber length can be several meters. The concept is to form a confined plasma ring , and...Focusing of Magnetically Confined Plasma Rings ," Physical Review Letters, Vol. 61, No. 25, pp.2843-2846, 19 December 1988. 2. Turner, W. C., Goldenbaum, G

Method for determining the effects of oxygen plasma on a specimen

NASA Technical Reports Server (NTRS)

Whitaker, Ann F. (Inventor)

1991-01-01

A method for determining the effects of exposure of oxygen plasma on a specimen such as a thin film polymer or thin metals. The method includes providing an apparatus with a chamber having a holder supporting the polymer specimen in a plasma environment provided in the chamber. The chamber is regulated to a predetermined pressure and set temperature prior to the introduction of oxygen plasma therein. The specimen is then subjected to the plasma environment for a predetermined time during which time the temperature of the specimen is sensed and regulated to be maintained at the set temperature. Temperature sensing is accomplished by a probe which senses any changes in bulk sample temperature. Temperature regulation is provided by a thermoelectric module and by a coolant flow tube.

Characteristics of the Plasma Source for Ground Ionosphere Simulation Surveyed by Disk-Type Langmuir Probe

NASA Astrophysics Data System (ADS)

Ryu, Kwangsun; Lee, Junchan; Kim, Songoo; Chung, Taejin; Shin, Goo-Hwan; Cha, Wonho; Min, Kyoungwook; Kim, Vitaly P.

2017-12-01

A space plasma facility has been operated with a back-diffusion-type plasma source installed in a mid-sized vacuum chamber with a diameter of 1.5 m located in Satellite Technology Research Center (SaTReC), Korea Advanced Institute of Science and Technology (KAIST). To generate plasma with a temperature and density similar to the ionospheric plasma, nickel wires coated with carbonate solution were used as filaments that emit thermal electrons, and the accelerated thermal electrons emitted from the heated wires collide with the neutral gas to form plasma inside the chamber. By using a disk-type Langmuir probe installed inside the vacuum chamber, the generation of plasma similar to the space environment was validated. The characteristics of the plasma according to the grid and plate anode voltages were investigated. The grid voltage of the plasma source is realized as a suitable parameter for manipulating the electron density, while the plate voltage is suitable for adjusting the electron temperature. A simple physical model based on the collision cross-section of electron impact on nitrogen molecule was established to explain the plasma generation mechanism.

Quasi-steady carbon plasma source for neutral beam injector

DOE Office of Scientific and Technical Information (OSTI.GOV)

Koguchi, H., E-mail: h-koguchi@aist.go.jp; Sakakita, H.; Kiyama, S.

2014-02-15

Carbon plasma is successfully sustained during 1000 s without any carrier gas in the bucket type ionization chamber with cusp magnetic field. Every several seconds, seed plasmas having ∼3 ms duration time are injected into the ionization chamber by a shunting arch plasma gun. The weakly ionized carbon plasma ejected from the shunting arch is also ionized by 2.45 GHz microwave at the electron cyclotron resonance surface and the plasma can be sustained even in the interval of gun discharges. Control of the gun discharge interval allows to keep high pressure and to sustain the plasma for long duration.

Quasi-steady carbon plasma source for neutral beam injector.

PubMed

Koguchi, H; Sakakita, H; Kiyama, S; Shimada, T; Sato, Y; Hirano, Y

2014-02-01

Carbon plasma is successfully sustained during 1000 s without any carrier gas in the bucket type ionization chamber with cusp magnetic field. Every several seconds, seed plasmas having ∼3 ms duration time are injected into the ionization chamber by a shunting arch plasma gun. The weakly ionized carbon plasma ejected from the shunting arch is also ionized by 2.45 GHz microwave at the electron cyclotron resonance surface and the plasma can be sustained even in the interval of gun discharges. Control of the gun discharge interval allows to keep high pressure and to sustain the plasma for long duration.

The effect of cavity tuning on oxygen beam currents of an A-ECR type 14 GHz electron cyclotron resonance ion source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Tarvainen, O., E-mail: olli.tarvainen@jyu.fi; Orpana, J.; Kronholm, R.

2016-09-15

The efficiency of the microwave-plasma coupling plays a significant role in the production of highly charged ion beams with electron cyclotron resonance ion sources (ECRISs). The coupling properties are affected by the mechanical design of the ion source plasma chamber and microwave launching system, as well as damping of the microwave electric field by the plasma. Several experiments attempting to optimize the microwave-plasma coupling characteristics by fine-tuning the frequency of the injected microwaves have been conducted with varying degrees of success. The inherent difficulty in interpretation of the frequency tuning results is that the effects of microwave coupling system andmore » the cavity behavior of the plasma chamber cannot be separated. A preferable approach to study the effect of the cavity properties of the plasma chamber on extracted beam currents is to adjust the cavity dimensions. The results of such cavity tuning experiments conducted with the JYFL 14 GHz ECRIS are reported here. The cavity properties were adjusted by inserting a conducting tuner rod axially into the plasma chamber. The extracted beam currents of oxygen charge states O{sup 3+}–O{sup 7+} were recorded at various tuner positions and frequencies in the range of 14.00–14.15 GHz. It was observed that the tuner position affects the beam currents of high charge state ions up to several tens of percent. In particular, it was found that at some tuner position / frequency combinations the plasma exhibited “mode-hopping” between two operating regimes. The results improve the understanding of the role of plasma chamber cavity properties on ECRIS performances.« less

A Desorbed Gas Molecular Ionization Mechanism for Arcing Onset in Solar Arrays Immersed in a Low-Density Plasma

NASA Technical Reports Server (NTRS)

Galofaro, J.; Vayner, B.; Ferguson, D.; Degroot, W.

2002-01-01

Previous experimental studies have hypothesized that the onset of Solar Array Arc (SAA) initiation in low-density space plasmas is caused by a desorbed gas molecular ionization mechanism. Indeed past investigations performed at the NASA Glenn Plasma Interaction Facility tend to not only support the desorbed gas molecular ionization mechanism, but have gone as far as identifying the crucial molecular species that must be present for molecular ion dominated process to occur. When electrical breakdown occurs at a triple junction site on a solar array panel, a quasi-neutral plasma cloud is ejected. Assuming the main component of the expelled plasma cloud by weight is due to water vapor, the fastest process available is due to HO molecules and OH(+) ions, or more succinctly, dissociative molecular-ion dominated recombination processes: H2O(+) + e(-) yields H* + OH*. Recently published spectroscopic observations of solar array arc spectra in ground tests have revealed the well-known molecular OH band (302 to 309nm), as well as the molecular SiH band (387nm peak), and the molecular CH band (432nm peak). Note that the OH band is observed in emission arcs where water vapor is present. Strong atomic lines were also observed for H(sub beta) at 486nm and H(sub alpha) at 656.3nm in prior ground testing. Independent supporting evidence of desorbed gas molecular ionization mechanisms also come from measurements of arc current pulse widths at different capacitances. We will revisit an earlier first order approximation demonstrating the dependence of arc current pulse widths on the square root of the capacitance. The simple arc current pulse width model will be then be used to estimate the temperature of the arc plasma (currently believed to be somewhere in the range of 3 to 5 eV). The current paper then seeks to extend the outlined work by including numerous vacuum chamber measurements obtained with a quadrupole mass spectrometer. A small solar array was mounted inside the vacuum chamber. A plasma source, also mounted inside the vacuum chamber, is used to simulate a low-density plasma environment. The solar array is then biased to a high negative potential and allowed to arc while a mass spectrometer is used to record the partial pressure of H2O and to track other significant changes in mass (1 to 150) AMU.

The INAF/IAPS Plasma Chamber for ionospheric simulation experiment

NASA Astrophysics Data System (ADS)

Diego, Piero

2016-04-01

The plasma chamber is particularly suitable to perform studies for the following applications: - plasma compatibility and functional tests on payloads envisioned to operate in the ionosphere (e.g. sensors onboard satellites, exposed to the external plasma environment); - calibration/testing of plasma diagnostic sensors; - characterization and compatibility tests on components for space applications (e.g. optical elements, harness, satellite paints, photo-voltaic cells, etc.); - experiments on satellite charging in a space plasma environment; - tests on active experiments which use ion, electron or plasma sources (ion thrusters, hollow cathodes, field effect emitters, plasma contactors, etc.); - possible studies relevant to fundamental space plasma physics. The facility consists of a large volume vacuum tank (a cylinder of length 4.5 m and diameter 1.7 m) equipped with a Kaufman type plasma source, operating with Argon gas, capable to generate a plasma beam with parameters (i.e. density and electron temperature) close to the values encountered in the ionosphere at F layer altitudes. The plasma beam (A+ ions and electrons) is accelerated into the chamber at a velocity that reproduces the relative motion between an orbiting satellite and the ionosphere (≈ 8 km/s). This feature, in particular, allows laboratory simulations of the actual compression and depletion phenomena which take place in the ram and wake regions around satellites moving through the ionosphere. The reproduced plasma environment is monitored using Langmuir Probes (LP) and Retarding Potential Analyzers (RPA). These sensors can be automatically moved within the experimental space using a sled mechanism. Such a feature allows the acquisition of the plasma parameters all around the space payload installed into the chamber for testing. The facility is currently in use to test the payloads of CSES satellite (Chinese Seismic Electromagnetic Satellite) devoted to plasma parameters and electric field measurements in a polar orbit at 500 km altitude.

Studies on Charge Variation and Waves in Dusty Plasmas

NASA Astrophysics Data System (ADS)

Kausik, Siddhartha Sankar

Plasma and dust grains are both ubiquitous ingredients of the universe. The interplay between them has opened up a new and fascinating research domain, that of dusty plasmas, which contain macroscopic particles of solid matter besides the usual plasma constituents. The research in dusty plasmas received a major boost in the early eighties with Voyager spacecraft observation on the formation of Saturn rings. Dusty plasmas are defined as partially or fully-ionized gases that contain micron-sized particles of electrically charged solid material, either dielectric or conducting. The physics of dusty plasmas has recently been studied intensively because of its importance for a number of applications in space and laboratory plasmas. This thesis presents the experimental studies on charge variation and waves in dusty plasmas. The experimental observations are carried out in two different experimental devices. Three different sets of experiments are carried out in two different experimental devices. Three different sets of experiments are carried out to study the dust charge variation in a filament discharge argon plasma. The dust grains used in these experiments are grains of silver. In another get of experiment, dust acoustic waves are studied in a de glow discharge argon plasma. Alumina dust grains are sprinkled in this experiment. The diagnostic tools used in these experiments are Langmuir probe and Faraday cup. The instruments used in these experiments are electrometer, He-Ne laser and charge coupled device (CCD) camera. Langmuir probe is used to measure plasma parameters, while Faraday cup and electrometer are used to measure very low current (~pA) carried by a collimated dust beam. He-Ne laser illuminates the dust grains and CCD camera is used to capture the images of dust acoustic waves. Silver dust grains are produced in the dust chamber by gas-evaporation technique. Due to differential pressure maintained between the dust and plasma chambers, the dust grains move upward in the form of a collimated beam. Argon plasma is produced in an experimental setup consisting of a dust chamber, a plasma chamber and a diagnostic chamber (also called deflection chamber) by striking a discharge between incandescent tungsten filaments and the magnetic cage, which is grounded. Plasma thus produced is confined by a full line cusped magnetic field confinement system consisting of a cylindrically shaped cage made up of stainless steel channels filled up with cube shaped having 1.2 kG field strength at its surface.

Plasma Diagnostics: Use and Justification in an Industrial Environment

NASA Astrophysics Data System (ADS)

Loewenhardt, Peter

1998-10-01

The usefulness and importance of plasma diagnostics have played a major role in the development of plasma processing tools in the semiconductor industry. As can be seen through marketing materials from semiconductor equipment manufacturers, results from plasma diagnostic equipment can be a powerful tool in selling the technological leadership of tool design. Some diagnostics have long been used for simple process control such as optical emission for endpoint determination, but in recent years more sophisticated and involved diagnostic tools have been utilized in chamber and plasma source development and optimization. It is now common to find an assortment of tools at semiconductor equipment companies such as Langmuir probes, mass spectrometers, spatial optical emission probes, impedance, ion energy and ion flux probes. An outline of how the importance of plasma diagnostics has grown at an equipment manufacturer over the last decade will be given, with examples of significant and useful results obtained. Examples will include the development and optimization of an inductive plasma source, trends and hardware effects on ion energy distributions, mass spectrometry influences on process development and investigations of plasma-wall interactions. Plasma diagnostic focus, in-house development and proliferation in an environment where financial justification requirements are both strong and necessary will be discussed.

Hybrid-PIC Computer Simulation of the Plasma and Erosion Processes in Hall Thrusters

NASA Technical Reports Server (NTRS)

Hofer, Richard R.; Katz, Ira; Mikellides, Ioannis G.; Gamero-Castano, Manuel

2010-01-01

HPHall software simulates and tracks the time-dependent evolution of the plasma and erosion processes in the discharge chamber and near-field plume of Hall thrusters. HPHall is an axisymmetric solver that employs a hybrid fluid/particle-in-cell (Hybrid-PIC) numerical approach. HPHall, originally developed by MIT in 1998, was upgraded to HPHall-2 by the Polytechnic University of Madrid in 2006. The Jet Propulsion Laboratory has continued the development of HPHall-2 through upgrades to the physical models employed in the code, and the addition of entirely new ones. Primary among these are the inclusion of a three-region electron mobility model that more accurately depicts the cross-field electron transport, and the development of an erosion sub-model that allows for the tracking of the erosion of the discharge chamber wall. The code is being developed to provide NASA science missions with a predictive tool of Hall thruster performance and lifetime that can be used to validate Hall thrusters for missions.

The plasma properties and electron emission characteristics of near-zero differential resistance of hollow cathode-based plasma contactors with a discharge chamber

NASA Astrophysics Data System (ADS)

Xie, Kan; Farnell, Casey C.; Williams, John D.

2014-08-01

The formation of electron emission-bias voltage (I-V) characteristics of near-zero differential resistance in the cathodic plasma contactor for bare electrodynamic tether applications, based on a hollow cathode embedded in a ring-cusp ionization stage, is studied. The existence of such an I-V regime is important to achieve low impedance performance without being affected by the space plasma properties for a cathodic plasma contactor. Experimental data on the plasma structure and properties downstream from the ionization stage are presented as functions of the xenon flow rate and the electron emission current. The electrons were emitted from the cathode to the cylindrical vacuum chamber wall (r = 0.9 m) under ≈10-5 Torr of vacuum pressure. The ring-cusp configuration selected for the plasma contactor created a 125-Gauss axial field near the cathode orifice, along with a large-volume 50-Gauss magnitude pocket in the stage. A baseline ion energy cost of ≈300 eV/ion was measured in the ionization stage when no electrons were emitted to the vacuum chamber wall. In addition, the anode fall growth limited the maximum propellant unitization to below ≈75% in the discharge loss curves for this ion stage. Detailed measurements on the plasma properties were carried out for the no-electron emission and 3 A emission conditions. The experimental data are compared with 1-D models, and the effectiveness of the model is discussed. The four key issues that played important roles in the process of building the near-zero different resistance I-V regime are: a significant amount of ionization by the emission electrons, a decrease in the number of reflected electrons in the plume, the electron-temperature increment, and low initial ion energy at the source outlet.

Efficiency of surface cleaning by a glow discharge for plasma spraying coating

NASA Astrophysics Data System (ADS)

Kadyrmetov, A. M.; Kashapov, N. F.; Sharifullin, S. N.; Saifutdinov, A. I.; Fadeev, S. A.

2016-06-01

The article presents the results of experimental studies of the quality of cleaning steel surfaces by a glow discharge for plasma spraying. Shows the results of measurements of the angle of surface wetting and bond strength of the plasma coating to the surface treated. The dependence of the influence of the glow discharge power, chamber pressure, distance between the electrodes and the processing time of the surface on cleaning efficiency. Optimal fields of factors is found. It is shown increase joint strength coating and base by 30-80% as a result of cleaning the substrate surface by a glow discharge plasma spraying.

Simulation and experimental verification of silicon dioxide deposition by PECVD

NASA Astrophysics Data System (ADS)

Xu, Qing; Li, Yu-Xing; Li, Xiao-Ning; Wang, Jia-Bin; Yang, Fan; Yang, Yi; Ren, Tian-Ling

2017-02-01

Deposition of silicon dioxide in high-density plasma is an important process in integrated circuit manufacturing. A software named CFD-ACE was used to simulate the mechanism of plasma in the chamber of plasma enhanced chemical vapor deposition (PECVD) system, and the evolution of the feature profile was simulated based on CFD-TOPO. Simulation and experiment of silicon dioxide that deposited in SiH4/N2O mixture by PECVD system was researched. The particle density, energy and angular distribution in the chamber were simulated and discussed. We also studied how the depth/width ratio affected the step coverage of the trench and analyzed the deposition rate of silicon dioxide on the feature scale. X-ray photoelectron spectroscopy (XPS) was used to analyze the elemental composition of thin films. Images of the feature profiles were taken by scanning electron microscope (SEM). The simulation results were in good agreement with experimental, which could guide the semiconductor device manufacture.

Comparison of two radio-frequency plasma sterilization processes using microspot evaluation of microbial inactivation.

PubMed

Lassen, Klaus S; Johansen, Jens E; Grün, Reinar

2006-07-01

In this study, we evaluated gas plasma surface sterilization methods in a specific sterilizer. We have introduced a new monitoring method using 0.4 microm pore size membranes, which in this study gave the information corresponding to 3000 exposed biological indicators per treatment cycle. This enabled us to compare the fraction of inoculates that showed no growth after exposure for 30 different locations in the chamber, and hereby identify weak and strong spots in the chamber with regard to sporicidal effect. Membranes were also used to expose a broad spectrum of soil bacteria for plasma treatment at four different conditions. The organisms were identified using PCR and sequencing. The test showed that Bacillus stearothermophilus spores were inactivated at the slowest rate among the tested microorganisms. Further alpha-proteobacteria (Gram negative) seemed more sensitive than the rest of the tested organisms. The microspot evaluation approach has been a most useful tool in the assessment of sterilization performance in sterilizers that do not have clear measurable parameters related to the sterilization.

Development of CVD Diamond for Industrial Applications Final Report CRADA No. TC-2047-02

DOE Office of Scientific and Technical Information (OSTI.GOV)

Caplan, M.; Olstad, R.; Jory, H.

2017-09-08

This project was a collaborative effort to develop and demonstrate a new millimeter microwave assisted chemical vapor deposition(CVD) process for manufacturing large diamond disks with greatly reduced processing times and costs from those now available. In the CVD process, carbon based gases (methane) and hydrogen are dissociated into plasma using microwave discharge and then deposited layer by layer as polycrystalline diamond onto a substrate. The available low frequency (2.45GHz) microwave sources used elsewhere (De Beers) result in low density plasmas and low deposition rates: 4 inch diamond disks take 6-8 weeks to process. The new system developed in this projectmore » uses a high frequency 30GHz Gyrotron as the microwave source and a quasi-optical CVD chamber resulting in a much higher density plasma which greatly reduced the diamond processing times (1-2 weeks)« less

Plasma Crystal-3 Plus experiment Chamber Leak Check

NASA Image and Video Library

2010-07-01

ISS024-E-007144 (1 July 2010) --- Russian cosmonaut Alexander Skvortsov, Expedition 24 commander, performs chamber leak checks on the new Plasma Crystal-3 Plus experiment in the Poisk Mini-Research Module 2 (MRM2) of the International Space Station.

Product surface hardening in non-self-sustained glow discharge plasma before synthesis of superhard coatings

NASA Astrophysics Data System (ADS)

Krasnov, P. S.; Metel, A. S.; Nay, H. A.

2017-05-01

Before the synthesis of superhard coating, the product surface is hardened by means of plasma nitriding, which prevents the surface deformations and the coating brittle rupture. The product heating by ions accelerated from plasma by applied to the product bias voltage leads to overheating and blunting of the product sharp edges. To prevent the blunting, it is proposed to heat the products with a broad beam of fast nitrogen molecules. The beam injection into a working vacuum chamber results in filling of the chamber with quite homogeneous plasma suitable for nitriding. Immersion in the plasma of the electrode and heightening of its potential up to 50-100 V initiate a non-self-sustained glow discharge between the electrode and the chamber. It enhances the plasma density by an order of magnitude and reduces its spatial nonuniformity down to 5-10%. When a cutting tool is isolated from the chamber, it is bombarded by plasma ions with an energy corresponding to its floating potential, which is lower than the sputtering threshold. Hence, the sharp edges are sputtered only by fast nitrogen molecules with the same rate as other parts of the tool surface. This leads to sharpening of the cutting tools instead of blunting.

Laboratory-scale uranium RF plasma confinement experiments

NASA Technical Reports Server (NTRS)

Roman, W. C.

1976-01-01

An experimental investigation was conducted using 80 kW and 1.2 MW RF induction heater facilities to aid in developing the technology necessary for designing a self-critical fissioning uranium plasma core reactor. Pure uranium hexafluoride (UF6) was injected into argon-confined, steady-state, RF-heated plasmas in different uranium plasma confinement tests to investigate the characteristics of plamas core nuclear reactors. The objectives were: (1) to confine as high a density of uranium vapor as possible within the plasma while simultaneously minimizing the uranium compound wall deposition; (2) to develop and test materials and handling techniques suitable for use with high-temperature, high-pressure gaseous UF6; and (3) to develop complementary diagnostic instrumentation and measurement techniques to characterize the uranium plasma and residue deposited on the test chamber components. In all tests, the plasma was a fluid-mechanically-confined vortex-type contained within a fused-silica cylindrical test chamber. The test chamber peripheral wall was 5.7 cm ID by 10 cm long.

Method and apparatus for monitoring plasma processing operations

DOEpatents

Smith, Jr., Michael Lane; Ward, Pamela Denise Peardon; Stevenson, Joel O'Don

2002-01-01

The invention generally relates to various aspects of a plasma process, and more specifically the monitoring of such plasma processes. One aspect relates in at least some manner to calibrating or initializing a plasma monitoring assembly. This type of calibration may be used to address wavelength shifts, intensity shifts, or both associated with optical emissions data obtained on a plasma process. A calibration light may be directed at a window through which optical emissions data is being obtained to determine the effect, if any, that the inner surface of the window is having on the optical emissions data being obtained therethrough, the operation of the optical emissions data gathering device, or both. Another aspect relates in at least some manner to various types of evaluations which may be undertaken of a plasma process which was run, and more typically one which is currently being run, within the processing chamber. Plasma health evaluations and process identification through optical emissions analysis are included in this aspect. Yet another aspect associated with the present invention relates in at least some manner to the endpoint of a plasma process (e.g., plasma recipe, plasma clean, conditioning wafer operation) or discrete/discernible portion thereof (e.g., a plasma step of a multiple step plasma recipe). Another aspect associated with the present invention relates to how one or more of the above-noted aspects may be implemented into a semiconductor fabrication facility, such as the distribution of wafers to a wafer production system. A final aspect of the present invention relates to a network a plurality of plasma monitoring systems, including with remote capabilities (i.e., outside of the clean room).

40 CFR Table I-16 to Subpart I of... - Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Code of Federal Regulations, 2014 CFR

2014-07-01

... Manufacturing: Plasma Etch/Wafer Clean Process Type: CF4 75 CH3F 97 CHF3 97 CH2F2 97 C2F6 97 C3F8 97 C4F6 97 C4F8 97 C5F8 97 SF6 97 NF3 96 All other carbon-based plasma etch/wafer clean fluorinated GHG 60 Chamber...

Vacuum Plasma Spray Forming of Tungsten Lorentz Force Accelerator Components

NASA Technical Reports Server (NTRS)

Zimmerman, Frank R.

2001-01-01

The Vacuum Plasma Spray (VPS) Laboratory at NASA's Marshall Space Flight Center has developed and demonstrated a fabrication technique using the VPS process to form anode sections for a Lorentz force accelerator from tungsten. Lorentz force accelerators are an attractive form of electric propulsion that provides continuous, high-efficiency propulsion at useful power levels for such applications as orbit transfers or deep space missions. The VPS process is used to deposit refractory metals such as tungsten onto a graphite mandrel of the desired shape. Because tungsten is reactive at high temperatures, it is thermally sprayed in an inert environment where the plasma gun melts and accelerates the metal powder onto the mandrel. A three-axis robot inside the chamber controls the motion of the plasma spray torch. A graphite mandrel acts as a male mold, forming the required contour and dimensions of the inside surface of the anode. This paper describes the processing techniques, design considerations, and process development associated with the VPS forming of the Lorentz force accelerator.

Plasma-surface interaction in the Be/W environment: Conclusions drawn from the JET-ILW for ITER

NASA Astrophysics Data System (ADS)

Brezinsek, S.; JET-EFDA contributors

2015-08-01

The JET ITER-Like Wall experiment (JET-ILW) provides an ideal test bed to investigate plasma-surface interaction (PSI) and plasma operation with the ITER plasma-facing material selection employing beryllium in the main chamber and tungsten in the divertor. The main PSI processes: material erosion and migration, (b) fuel recycling and retention, (c) impurity concentration and radiation have be1en studied and compared between JET-C and JET-ILW. The current physics understanding of these key processes in the JET-ILW revealed that both interpretation of previously obtained carbon results (JET-C) and predictions to ITER need to be revisited. The impact of the first-wall material on the plasma was underestimated. Main observations are: (a) low primary erosion source in H-mode plasmas and reduction of the material migration from the main chamber to the divertor (factor 7) as well as within the divertor from plasma-facing to remote areas (factor 30 - 50). The energetic threshold for beryllium sputtering minimises the primary erosion source and inhibits multi-step re-erosion in the divertor. The physical sputtering yield of tungsten is low as 10-5 and determined by beryllium ions. (b) Reduction of the long-term fuel retention (factor 10 - 20) in JET-ILW with respect to JET-C. The remaining retention is caused by implantation and co-deposition with beryllium and residual impurities. Outgassing has gained importance and impacts on the recycling properties of beryllium and tungsten. (c) The low effective plasma charge (Zeff = 1.2) and low radiation capability of beryllium reveal the bare deuterium plasma physics. Moderate nitrogen seeding, reaching Zeff = 1.6 , restores in particular the confinement and the L-H threshold behaviour. ITER-compatible divertor conditions with stable semi-detachment were obtained owing to a higher density limit with ILW. Overall JET demonstrated successful plasma operation in the Be/W material combination and confirms its advantageous PSI behaviour and gives strong support to the ITER material selection.

Vacuum Compatibility of Flux-Core Arc Welding (FCAW)

NASA Astrophysics Data System (ADS)

Arose, Dana; Denault, Martin; Jurcznski, Stephan

2010-11-01

Typically, vacuum chambers are welded together using gas tungsten arc welding (GTAW) or gas metal arc welding (GMAW). This is demonstrated in the vacuum chamber of Princeton Plasma Physics Lab's (PPPL) National Spherical Torus Experiment (NSTX). These processes are slow and apply excess heat to the base metal, which may cause the vacuum chamber to deform beyond designed tolerance. Flux cored arc welding (FCAW) avoids these problems, but may produce an unacceptable amount of outgasing due to the flux shielding. We believe impurities due to outgasing from FCAW will not greatly exceed those found in GTAW and GMAW welding. To test this theory, samples welded together using all three welding processes will be made and baked in a residual gas analyzer (RGA). The GTAW and GMAW welds will be tested to establish a metric for permissible outgasing. By testing samples from all three processes we hope to demonstrate that FCAW does not significantly outgas, and is therefore a viable alternative to GTAW and GMAW. Results from observations will be presented.

Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing

DOE Office of Scientific and Technical Information (OSTI.GOV)

Takahashi, Shunji; Katagiri Engineering Co., Ltd., 3-5-34 Shitte Tsurumi-ku, Yokohama 230-0003; Takashima, Seigo

2009-09-01

Atomic radicals such as hydrogen (H) and oxygen (O) play important roles in process plasmas. In a previous study, we developed a system for measuring the absolute density of H, O, nitrogen, and carbon atoms in plasmas using vacuum ultraviolet absorption spectroscopy (VUVAS) with a compact light source using an atmospheric pressure microplasma [microdischarge hollow cathode lamp (MHCL)]. In this study, we developed a monitoring probe for atomic radicals employing the VUVAS with the MHCL. The probe size was 2.7 mm in diameter. Using this probe, only a single port needs to be accessed for radical density measurements. We successfullymore » measured the spatial distribution of the absolute densities of H and O atomic radicals in a radical-based plasma processing system by moving the probe along the radial direction of the chamber. This probe allows convenient analysis of atomic radical densities to be carried out for any type of process plasma at any time. We refer to this probe as a ubiquitous monitoring probe for atomic radicals.« less

Automated processing of whole blood samples into microliter aliquots of plasma.

PubMed

Burtis, C A; Johnson, W W; Walker, W A

1988-01-01

A rotor that accepts and automatically processes a bulk aliquot of a single blood sample into multiple aliquots of plasma has been designed and built. The rotor consists of a central processing unit, which includes a disk containing eight precision-bore capillaries. By varying the internal diameters of the capillaries, aliquot volumes ranging 1 to 10 mul can be prepared. In practice, an unmeasured volume of blood is placed in a centre well, and, as the rotor begins to spin, is moved radially into a central annular ring where it is distributed into a series of processing chambers. The rotor is then spun at 3000 rpm for 10 min. When the centrifugal field is removed by slowly decreasing the rotor speed, an aliquot of plasma is withdrawn by capillary action into each of the capillary tubes. The disk containing the eight measured aliquots of plasma is subsequently removed and placed in a modifed rotor for conventional centrifugal analysis. Initial evaluation of the new rotor indicates that it is capable of producing discrete, microliter volumes of plasma with a degree of accuracy and precision approaching that of mechanical pipettes.

Ion beam generating apparatus

DOEpatents

Brown, I.G.; Galvin, J.

1987-12-22

An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. 10 figs.

Generation of low-temperature air plasma for food processing

NASA Astrophysics Data System (ADS)

Stepanova, Olga; Demidova, Maria; Astafiev, Alexander; Pinchuk, Mikhail; Balkir, Pinar; Turantas, Fulya

2015-11-01

The project is aimed at developing a physical and technical foundation of generating plasma with low gas temperature at atmospheric pressure for food industry needs. As known, plasma has an antimicrobial effect on the numerous types of microorganisms, including those that cause food spoilage. In this work an original experimental setup has been developed for the treatment of different foods. It is based on initiating corona or dielectric-barrier discharge in a chamber filled with ambient air in combination with a certain helium admixture. The experimental setup provides various conditions of discharge generation (including discharge gap geometry, supply voltage, velocity of gas flow, content of helium admixture in air and working pressure) and allows for the measurement of the electrical discharge parameters. Some recommendations on choosing optimal conditions of discharge generation for experiments on plasma food processing are developed.

Current leakage for low altitude satellites - Modeling applications. [simulation of high voltage solar cell array in ionospheric plasma environment

NASA Technical Reports Server (NTRS)

Konradi, A.; Mccoy, J. E.; Garriott, O. K.

1979-01-01

To simulate the behavior of a high voltage solar cell array in the ionospheric plasma environment, the large (90 ft x 55 ft diameter) vacuum chamber was used to measure the high-voltage plasma interactions of a 3 ft x 30 ft conductive panel. The chamber was filled with Nitrogen and Argon plasma at electron densities of up to 1,000,000 per cu cm. Measurements of current flow to the plasma were made in three configurations: (a) with one end of the panel grounded, (b) with the whole panel floating while a high bias was applied between the ends of the panel, and (c) with the whole panel at high negative voltage with respect to the chamber walls. The results indicate that a simple model with a constant panel conductivity and plasma resistance can adequately describe the voltage distribution along the panel and the plasma current flow. As expected, when a high potential difference is applied to the panel ends more than 95% of the panel floats negative with respect to the plasma.

Design and fabrication of a glovebox for the Plasma Hearth Process radioactive bench-scale system

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wahlquist, D.R.

This paper presents some of the design considerations and fabrication techniques for building a glovebox for the Plasma Hearth Process (PHP) radioactive bench-scale system. The PHP radioactive bench-scale system uses a plasma torch to process a variety of radioactive materials into a final vitrified waste form. The processed waste will contain plutonium and trace amounts of other radioactive materials. The glovebox used in this system is located directly below the plasma chamber and is called the Hearth Handling Enclosure (HHE). The HHE is designed to maintain a confinement boundary between the processed waste and the operator. Operations that take placemore » inside the HHE include raising and lowering the hearth using a hydraulic lift table, transporting the hearth within the HHE using an overhead monorail and hoist system, sampling and disassembly of the processed waste and hearth, weighing the hearth, rebuilding a hearth, and sampling HEPA filters. The PHP radioactive bench-scale system is located at the TREAT facility at Argonne National Laboratory-West in Idaho Falls, Idaho.« less

Isotropic plasma etching of Ge Si and SiN x films

DOE PAGES

Henry, Michael David; Douglas, Erica Ann

2016-08-31

This study reports on selective isotropic dry etching of chemically vapor deposited (CVD) Ge thin film, release layers using a Shibaura chemical downstream etcher (CDE) with NF 3 and Ar based plasma chemistry. Relative etch rates between Ge, Si and SiN x are described with etch rate reductions achieved by adjusting plasma chemistry with O 2. Formation of oxides reducing etch rates were measured for both Ge and Si, but nitrides or oxy-nitrides created using direct injection of NO into the process chamber were measured to increase Si and SiN x etch rates while retarding Ge etching.

Laser Ignition Technology for Bi-Propellant Rocket Engine Applications

NASA Technical Reports Server (NTRS)

Thomas, Matthew E.; Bossard, John A.; Early, Jim; Trinh, Huu; Dennis, Jay; Turner, James (Technical Monitor)

2001-01-01

The fiber optically coupled laser ignition approach summarized is under consideration for use in igniting bi-propellant rocket thrust chambers. This laser ignition approach is based on a novel dual pulse format capable of effectively increasing laser generated plasma life times up to 1000 % over conventional laser ignition methods. In the dual-pulse format tinder consideration here an initial laser pulse is used to generate a small plasma kernel. A second laser pulse that effectively irradiates the plasma kernel follows this pulse. Energy transfer into the kernel is much more efficient because of its absorption characteristics thereby allowing the kernel to develop into a much more effective ignition source for subsequent combustion processes. In this research effort both single and dual-pulse formats were evaluated in a small testbed rocket thrust chamber. The rocket chamber was designed to evaluate several bipropellant combinations. Optical access to the chamber was provided through small sapphire windows. Test results from gaseous oxygen (GOx) and RP-1 propellants are presented here. Several variables were evaluated during the test program, including spark location, pulse timing, and relative pulse energy. These variables were evaluated in an effort to identify the conditions in which laser ignition of bi-propellants is feasible. Preliminary results and analysis indicate that this laser ignition approach may provide superior ignition performance relative to squib and torch igniters, while simultaneously eliminating some of the logistical issues associated with these systems. Further research focused on enhancing the system robustness, multiplexing, and window durability/cleaning and fiber optic enhancements is in progress.

Cooled railplug

DOEpatents

Weldon, W.F.

1996-05-07

The railplug is a plasma ignitor capable of injecting a high energy plasma jet into a combustion chamber of an internal combustion engine or continuous combustion system. An improved railplug is provided which has dual coaxial chambers (either internal or external to the center electrode) that provide for forced convective cooling of the electrodes using the normal pressure changes occurring in an internal combustion engine. This convective cooling reduces the temperature of the hot spot associated with the plasma initiation point, particularly in coaxial railplug configurations, and extends the useful life of the railplug. The convective cooling technique may also be employed in a railplug having parallel dual rails using dual, coaxial chambers. 10 figs.

Cooled railplug

DOEpatents

Weldon, William F.

1996-01-01

The railplug is a plasma ignitor capable of injecting a high energy plasma jet into a combustion chamber of an internal combustion engine or continuous combustion system. An improved railplug is provided which has dual coaxial chambers (either internal or external to the center electrode) that provide for forced convective cooling of the electrodes using the normal pressure changes occurring in an internal combustion engine. This convective cooling reduces the temperature of the hot spot associated with the plasma initiation point, particularly in coaxial railplug configurations, and extends the useful life of the railplug. The convective cooling technique may also be employed in a railplug having parallel dual rails using dual, coaxial chambers.

Ion source with external RF antenna

DOEpatents

Leung, Ka-Ngo; Ji, Qing; Wilde, Stephen

2005-12-13

A radio frequency (RF) driven plasma ion source has an external RF antenna, i.e. the RF antenna is positioned outside the plasma generating chamber rather than inside. The RF antenna is typically formed of a small diameter metal tube coated with an insulator. An external RF antenna assembly is used to mount the external RF antenna to the ion source. The RF antenna tubing is wound around the external RF antenna assembly to form a coil. The external RF antenna assembly is formed of a material, e.g. quartz, which is essentially transparent to the RF waves. The external RF antenna assembly is attached to and forms a part of the plasma source chamber so that the RF waves emitted by the RF antenna enter into the inside of the plasma chamber and ionize a gas contained therein. The plasma ion source is typically a multi-cusp ion source.

Plasma generators, reactor systems and related methods

DOEpatents

Kong, Peter C [Idaho Falls, ID; Pink, Robert J [Pocatello, ID; Lee, James E [Idaho Falls, ID

2007-06-19

A plasma generator, reactor and associated systems and methods are provided in accordance with the present invention. A plasma reactor may include multiple sections or modules which are removably coupled together to form a chamber. Associated with each section is an electrode set including three electrodes with each electrode being coupled to a single phase of a three-phase alternating current (AC) power supply. The electrodes are disposed about a longitudinal centerline of the chamber and are arranged to provide and extended arc and generate an extended body of plasma. The electrodes are displaceable relative to the longitudinal centerline of the chamber. A control system may be utilized so as to automatically displace the electrodes and define an electrode gap responsive to measure voltage or current levels of the associated power supply.

Plasma core reactor simulations using RF uranium seeded argon discharges

NASA Technical Reports Server (NTRS)

Roman, W. C.

1976-01-01

Experimental results are described in which pure uranium hexafluoride was injected into an argon-confined, steady-state, RF-heated plasma to investigate characteristics of plasma core nuclear reactors. The 80 kW (13.56 MHz) and 1.2 MW (5.51 MHz) rf induction heater facilities were used to determine a test chamber flow scheme which offered best uranium confinement with minimum wall coating. The cylindrical fused-silica test chamber walls were 5.7-cm-ID by 10-cm-long. Test conditions included RF powers of 2-85 kW, chamber pressures of 1-12 atm, and uranium hexafluoride mass-flow rates of 0.005-0.13 g/s. Successful techniques were developed for fluid-mechanical confinement of RF-heated plasmas with pure uranium hexafluoride injection.

Plasma driven neutron/gamma generator

DOEpatents

Leung, Ka-Ngo; Antolak, Arlyn

2015-03-03

An apparatus for the generation of neutron/gamma rays is described including a chamber which defines an ion source, said apparatus including an RF antenna positioned outside of or within the chamber. Positioned within the chamber is a target material. One or more sets of confining magnets are also provided to create a cross B magnetic field directly above the target. To generate neutrons/gamma rays, the appropriate source gas is first introduced into the chamber, the RF antenna energized and a plasma formed. A series of high voltage pulses are then applied to the target. A plasma sheath, which serves as an accelerating gap, is formed upon application of the high voltage pulse to the target. Depending upon the selected combination of source gas and target material, either neutrons or gamma rays are generated, which may be used for cargo inspection, and the like.

A linear helicon plasma device with controllable magnetic field gradient.

PubMed

Barada, Kshitish K; Chattopadhyay, P K; Ghosh, J; Kumar, Sunil; Saxena, Y C

2012-06-01

Current free double layers (CFDLs) are localized potential structures having spatial dimensions - Debye lengths and potential drops of more than local electron temperature across them. CFDLs do not need a current for them to be sustained and hence they differ from the current driven double layers. Helicon antenna produced plasmas in an expanded chamber along with an expanding magnetic field have shown the existence of CFDL near the expansion region. A helicon plasma device has been designed, fabricated, and installed in the Institute for Plasma Research, India to study the role of maximum magnetic field gradient as well as its location with respect to the geometrical expansion region of the chamber in CFDL formation. The special feature of this machine consisting of two chambers of different radii is its capability of producing different magnetic field gradients near the physical boundary between the two chambers either by changing current in one particular coil in the direction opposite to that in other coils and/or by varying the position of this particular coil. Although, the machine is primarily designed for CFDL experiments, it is also capable of carrying out many basic plasma physics experiments such as wave propagation, wave coupling, and plasma instabilities in a varying magnetic field topology. In this paper, we will present the details of the machine construction, its specialties, and some preliminary results about the production and characterization of helicon plasma in this machine.

Near-zero emissions combustor system for syngas and biofuels

DOE Office of Scientific and Technical Information (OSTI.GOV)

Yongho, Kim; Rosocha, Louis

2010-01-01

A multi-institutional plasma combustion team was awarded a research project from the DOE/NNSA GIPP (Global Initiative for Prolifereation Prevention) office. The Institute of High Current Electronics (Tomsk, Russia); Leonardo Technologies, Inc. (an American-based industrial partner), in conjunction with the Los Alamos National Laboratory are participating in the project to develop novel plasma assisted combustion technologies. The purpose of this project is to develop prototypes of marketable systems for more stable and cleaner combustion of syngas/biofuels and to demonstrate that this technology can be used for a variety of combustion applications - with a major focus on contemporary gas turbines. Inmore » this paper, an overview of the project, along with descriptions of the plasma-based combustors and associated power supplies will be presented. Worldwide, it is recognized that a variety of combustion fuels will be required to meet the needs for supplying gas-turbine engines (electricity generation, propulsion), internal combustion engines (propulsion, transportation), and burners (heat and electricity generation) in the 21st Century. Biofuels and biofuel blends have already been applied to these needs, but experience difficulties in modifications to combustion processes and combustor design and the need for flame stabilization techniques to address current and future environmental and energy-efficiency challenges. In addition, municipal solid waste (MSW) has shown promise as a feedstock for heat and/or electricity-generating plants. However, current combustion techniques that use such fuels have problems with achieving environmentally-acceptable air/exhaust emissions and can also benefit from increased combustion efficiency. This project involves a novel technology (a form of plasma-assisted combustion) that can address the above issues. Plasma-assisted combustion (PAC) is a growing field that is receiving worldwide attention at present. The project is focused on research necessary to develop a novel, high-efficiency, low-emissions (near-zero, or as low as reasonably achievable), advanced combustion technology for electricity and heat production from biofuels and fuels derived from MSW. For any type of combustion technology, including the advanced technology of this project, two problems of special interest must be addressed: developing and optimizing the combustion chambers and the systems for igniting and sustaining the fuel-burning process. For MSW in particular, there are new challenges over gaseous or liquid fuels because solid fuels must be ground into fine particulates ({approx} 10 {micro}m diameter), fed into the advanced combustor, and combusted under plasma-assisted conditions that are quite different than gaseous or liquid fuels. The principal idea of the combustion chamber design is to use so-called reverse vortex gas flow, which allows efficient cooling of the chamber wall and flame stabilization in the central area of the combustor (Tornado chamber). Considerable progress has been made in design ing an advanced, reverse vortex flow combustion chamber for biofuels, although it was not tested on biofuels and a system that could be fully commercialized has never been completed.« less

Integral electrical characteristics and local plasma parameters of a RF ion thruster

DOE Office of Scientific and Technical Information (OSTI.GOV)

Masherov, P. E.; Riaby, V. A., E-mail: riaby2001@yahoo.com; Godyak, V. A.

2016-02-15

Comprehensive diagnostics has been carried out for a RF ion thruster based on inductively coupled plasma (ICP) source with an external flat antenna coil enhanced by ferrite core. The ICP was confined within a cylindrical chamber with low aspect ratio to minimize plasma loss to the chamber wall. Integral diagnostics of the ICP electrical parameters (RF power balance and coil current) allowed for evaluation of the antenna coils, matching networks, and eddy current loss and the true RF power deposited to plasma. Spatially resolved electron energy distribution functions, plasma density, electron temperatures, and plasma potentials were measured with movable Langmuirmore » probes.« less

Observation of frequency up-conversion in the propagation of a high-power microwave pulse in a self-generated plasma

NASA Technical Reports Server (NTRS)

Kuo, S. P.; Zhang, Y. S.; Ren, A.

1990-01-01

A chamber experiment is conducted to study the propagation of a high-power microwave pulse. The results show that the pulse is experiencing frequency up-shift while ionizing the background air if the initial carrier frequency of the pulse is higher than the electron plasma frequency at the incident boundary. Such a frequency autoconversion process may lead to reflectionless propagation of a high-power microwave pulse through the atmosphere.

Numerical Simulation of Flow in the Chamber of the Water-Argon Plasma Generator

NASA Astrophysics Data System (ADS)

Hlbočan, Peter; Varchola, Michal; Knížat, Branislav; Mlkvik, Marek; Olšiak, Róbert

2012-12-01

The paper describes the CFD simulation of the flow of gas and plasma in a plasma generator with a hybrid stabilization of the electric arc. The momentum equations of the model also take Lorentz forces into account. In the energy equation, Joule heat is introduced as an energy source. The introduction of boundary conditions is also explained, as along with plasma transport properties and a method of solution. The paper presents selected results of pressure and velocity fields in the chamber of the plasma generator.

Method For Plasma Source Ion Implantation And Deposition For Cylindrical Surfaces

DOEpatents

Fetherston, Robert P. , Shamim, Muhammad M. , Conrad, John R.

1997-12-02

Uniform ion implantation and deposition onto cylindrical surfaces is achieved by placing a cylindrical electrode in coaxial and conformal relation to the target surface. For implantation and deposition of an inner bore surface the electrode is placed inside the target. For implantation and deposition on an outer cylindrical surface the electrode is placed around the outside of the target. A plasma is generated between the electrode and the target cylindrical surface. Applying a pulse of high voltage to the target causes ions from the plasma to be driven onto the cylindrical target surface. The plasma contained in the space between the target and the electrode is uniform, resulting in a uniform implantation or deposition of the target surface. Since the plasma is largely contained in the space between the target and the electrode, contamination of the vacuum chamber enclosing the target and electrodes by inadvertent ion deposition is reduced. The coaxial alignment of the target and the electrode may be employed for the ion assisted deposition of sputtered metals onto the target, resulting in a uniform coating of the cylindrical target surface by the sputtered material. The independently generated and contained plasmas associated with each cylindrical target/electrode pair allows for effective batch processing of multiple cylindrical targets within a single vacuum chamber, resulting in both uniform implantation or deposition, and reduced contamination of one target by adjacent target/electrode pairs.

Pulsed fusion space propulsion: Computational Magneto-Hydro Dynamics of a multi-coil parabolic reaction chamber

NASA Astrophysics Data System (ADS)

Romanelli, Gherardo; Mignone, Andrea; Cervone, Angelo

2017-10-01

Pulsed fusion propulsion might finally revolutionise manned space exploration by providing an affordable and relatively fast access to interplanetary destinations. However, such systems are still in an early development phase and one of the key areas requiring further investigations is the operation of the magnetic nozzle, the device meant to exploit the fusion energy and generate thrust. One of the last pulsed fusion magnetic nozzle design is the so called multi-coil parabolic reaction chamber: the reaction is thereby ignited at the focus of an open parabolic chamber, enclosed by a series of coaxial superconducting coils that apply a magnetic field. The field, beside confining the reaction and preventing any contact between hot fusion plasma and chamber structure, is also meant to reflect the explosion and push plasma out of the rocket. Reflection is attained thanks to electric currents induced in conductive skin layers that cover each of the coils, the change of plasma axial momentum generates thrust in reaction. This working principle has yet to be extensively verified and computational Magneto-Hydro Dynamics (MHD) is a viable option to achieve that. This work is one of the first detailed ideal-MHD analysis of a multi-coil parabolic reaction chamber of this kind and has been completed employing PLUTO, a freely distributed computational code developed at the Physics Department of the University of Turin. The results are thus a preliminary verification of the chamber's performance. Nonetheless, plasma leakage through the chamber structure has been highlighted. Therefore, further investigations are required to validate the chamber design. Implementing a more accurate physical model (e.g. Hall-MHD or relativistic-MHD) is thus mandatory, and PLUTO shows the capabilities to achieve that.

Silicon cells made by self-aligned selective-emitter plasma-etchback process

DOEpatents

Ruby, Douglas S.; Schubert, William K.; Gee, James M.; Zaidi, Saleem H.

2000-01-01

Photovoltaic cells and methods for making them are disclosed wherein the metallized grids of the cells are used to mask portions of cell emitter regions to allow selective etching of phosphorus-doped emitter regions. The preferred etchant is SF.sub.6 or a combination of SF.sub.6 and O.sub.2. This self-aligned selective etching allows for enhanced blue response (versus cells with uniform heavy doping of the emitter) while preserving heavier doping in the region beneath the gridlines needed for low contact resistance. Embodiments are disclosed for making cells with or without textured surfaces. Optional steps include plasma hydrogenation and PECVD nitride deposition, each of which are suited to customized applications for requirements of given cells to be manufactured. The techniques disclosed could replace expensive and difficult alignment methodologies used to obtain selectively etched emitters, and they may be easily integrated with existing plasma processing methods and techniques of the invention may be accomplished in a single plasma-processing chamber.

A source with a 10{sup 13} DT neutron yield on the basis of a spherical plasma focus chamber

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zavyalov, N. V.; Maslov, V. V.; Rumyantsev, V. G., E-mail: rumyantsev@expd.vniief.ru

2013-03-15

Results from preliminary experimental research of neutron emission generated by a spherical plasma focus chamber filled with an equal-component deuterium-tritium mixture are presented. At a maximum current amplitude in the discharge chamber of {approx}1.5 MA, neutron pulses with a full width at half-maximum of 75-80 ns and an integral yield of {approx}1.3 Multiplication-Sign 10{sup 13} DT neutrons have been recorded.

Gaseous isotope separation using solar wind phenomena.

PubMed

Wang, C G

1980-12-01

A large evacuated drum-like chamber fitted with supersonic nozzles in the center, with the chamber and the nozzles corotating, can separate gaseous fluids according to their molecular weights. The principle of separation is essentially the same as that of the solar wind propagation, in which components of the plasma fluid are separated due to their difference in the time-of-flight. The process can inherently be very efficient, serving as a pump as well as a separator, and producing well over 10(5) separative work units (kg/year) for the hydrogen/deuterium mixture at high-velocity flows.

Determination of the neutral oxygen atom density in a plasma reactor loaded with metal samples

NASA Astrophysics Data System (ADS)

Mozetic, Miran; Cvelbar, Uros

2009-08-01

The density of neutral oxygen atoms was determined during processing of metal samples in a plasma reactor. The reactor was a Pyrex tube with an inner diameter of 11 cm and a length of 30 cm. Plasma was created by an inductively coupled radiofrequency generator operating at a frequency of 27.12 MHz and output power up to 500 W. The O density was measured at the edge of the glass tube with a copper fiber optics catalytic probe. The O atom density in the empty tube depended on pressure and was between 4 and 7 × 1021 m-3. The maximum O density was at a pressure of about 150 Pa, while the dissociation fraction of O2 molecules was maximal at the lowest pressure and decreased with increasing pressure. At about 300 Pa it dropped below 10%. The measurements were repeated in the chamber loaded with different metallic samples. In these cases, the density of oxygen atoms was lower than that in the empty chamber. The results were explained by a drain of O atoms caused by heterogeneous recombination on the samples.

Titanium Hydroxide - a Volatile Species at High Temperature

NASA Technical Reports Server (NTRS)

Nguyen, QuynhGiao N.

2010-01-01

An alternative method of low-temperature plasma functionalization of carbon nanotubes provides for the simultaneous attachment of molecular groups of multiple (typically two or three) different species or different mixtures of species to carbon nanotubes at different locations within the same apparatus. This method is based on similar principles, and involves the use of mostly the same basic apparatus, as those of the methods described in "Low-Temperature Plasma Functionalization of Carbon Nanotubes" (ARC-14661-1), NASA Tech Briefs, Vol. 28, No. 5 (May 2004), page 45. The figure schematically depicts the basic apparatus used in the aforementioned method, with emphasis on features that distinguish the present alternative method from the other. In this method, one exploits the fact that the composition of the deposition plasma changes as the plasma flows from its source in the precursor chamber toward the nanotubes in the target chamber. As a result, carbon nanotubes mounted in the target chamber at different flow distances (d1, d2, d3 . . .) from the precursor chamber become functionalized with different species or different mixtures of species.

Cold plasma decontamination of foods.

PubMed

Niemira, Brendan A

2012-01-01

Cold plasma is a novel nonthermal food processing technology that uses energetic, reactive gases to inactivate contaminating microbes on meats, poultry, fruits, and vegetables. This flexible sanitizing method uses electricity and a carrier gas, such as air, oxygen, nitrogen, or helium; antimicrobial chemical agents are not required. The primary modes of action are due to UV light and reactive chemical products of the cold plasma ionization process. A wide array of cold plasma systems that operate at atmospheric pressures or in low pressure treatment chambers are under development. Reductions of greater than 5 logs can be obtained for pathogens such as Salmonella, Escherichia coli O157:H7, Listeria monocytogenes, and Staphylococcus aureus. Effective treatment times can range from 120 s to as little as 3 s, depending on the food treated and the processing conditions. Key limitations for cold plasma are the relatively early state of technology development, the variety and complexity of the necessary equipment, and the largely unexplored impacts of cold plasma treatment on the sensory and nutritional qualities of treated foods. Also, the antimicrobial modes of action for various cold plasma systems vary depending on the type of cold plasma generated. Optimization and scale up to commercial treatment levels require a more complete understanding of these chemical processes. Nevertheless, this area of technology shows promise and is the subject of active research to enhance efficacy.

A linear helicon plasma device with controllable magnetic field gradient

DOE Office of Scientific and Technical Information (OSTI.GOV)

Barada, Kshitish K.; Chattopadhyay, P. K.; Ghosh, J.

2012-06-15

Current free double layers (CFDLs) are localized potential structures having spatial dimensions - Debye lengths and potential drops of more than local electron temperature across them. CFDLs do not need a current for them to be sustained and hence they differ from the current driven double layers. Helicon antenna produced plasmas in an expanded chamber along with an expanding magnetic field have shown the existence of CFDL near the expansion region. A helicon plasma device has been designed, fabricated, and installed in the Institute for Plasma Research, India to study the role of maximum magnetic field gradient as well asmore » its location with respect to the geometrical expansion region of the chamber in CFDL formation. The special feature of this machine consisting of two chambers of different radii is its capability of producing different magnetic field gradients near the physical boundary between the two chambers either by changing current in one particular coil in the direction opposite to that in other coils and/or by varying the position of this particular coil. Although, the machine is primarily designed for CFDL experiments, it is also capable of carrying out many basic plasma physics experiments such as wave propagation, wave coupling, and plasma instabilities in a varying magnetic field topology. In this paper, we will present the details of the machine construction, its specialties, and some preliminary results about the production and characterization of helicon plasma in this machine.« less

Experimental demonstration of ion extraction from magnetic thrust chamber for laser fusion rocket

NASA Astrophysics Data System (ADS)

Saito, Naoya; Yamamoto, Naoji; Morita, Taichi; Edamoto, Masafumi; Nakashima, Hideki; Fujioka, Shinsuke; Yogo, Akifumi; Nishimura, Hiroaki; Sunahara, Atsushi; Mori, Yoshitaka; Johzaki, Tomoyuki

2018-05-01

A magnetic thrust chamber is an important system of a laser fusion rocket, in which the plasma kinetic energy is converted into vehicle thrust by a magnetic field. To investigate the plasma extraction from the system, the ions in a plasma are diagnosed outside the system by charge collectors. The results clearly show that the ion extraction does not strongly depend on the magnetic field strength when the energy ratio of magnetic field to plasma is greater than 4.3, and the magnetic field pushes back the plasma to generate a thrust, as previously suggested by numerical simulation and experiments.

Plasma chamber testing of advanced photovoltaic solar array coupons

NASA Technical Reports Server (NTRS)

Hillard, G. Barry

1994-01-01

The solar array module plasma interactions experiment is a space shuttle experiment designed to investigate and quantify the high voltage plasma interactions. One of the objectives of the experiment is to test the performance of the Advanced Photovoltaic Solar Array (APSA). The material properties of array blanket are also studied as electric insulators for APSA arrays in high voltage conditions. Three twelve cell prototype coupons of silicon cells were constructed and tested in a space simulation chamber.

Catheterized plasma X-ray source

DOEpatents

Derzon, Mark S.; Robinson, Alex; Galambos, Paul C.

2017-06-20

A radiation generator useful for medical applications, among others, is provided. The radiation generator includes a catheter; a plasma discharge chamber situated within a terminal portion of the catheter, a cathode and an anode positioned within the plasma discharge chamber and separated by a gap, and a high-voltage transmission line extensive through the interior of the catheter and terminating on the cathode and anode so as to deliver, in operation, one or more voltage pulses across the gap.

Transfer of a cold atmospheric pressure plasma jet through a long flexible plastic tube

NASA Astrophysics Data System (ADS)

Kostov, Konstantin G.; Machida, Munemasa; Prysiazhnyi, Vadym; Honda, Roberto Y.

2015-04-01

This work proposes an experimental configuration for the generation of a cold atmospheric pressure plasma jet at the downstream end of a long flexible plastic tube. The device consists of a cylindrical dielectric chamber where an insulated metal rod that serves as high-voltage electrode is inserted. The chamber is connected to a long (up to 4 m) commercial flexible plastic tube, equipped with a thin floating Cu wire. The wire penetrates a few mm inside the discharge chamber, passes freely (with no special support) along the plastic tube and terminates a few millimeters before the tube end. The system is flushed with Ar and the dielectric barrier discharge (DBD) is ignited inside the dielectric chamber by a low frequency ac power supply. The gas flow is guided by the plastic tube while the metal wire, when in contact with the plasma inside the DBD reactor, acquires plasma potential. There is no discharge inside the plastic tube, however an Ar plasma jet can be extracted from the downstream tube end. The jet obtained by this method is cold enough to be put in direct contact with human skin without an electric shock. Therefore, by using this approach an Ar plasma jet can be generated at the tip of a long plastic tube far from the high-voltage discharge region, which provides the safe operation conditions and device flexibility required for medical treatment.

Plasma studies of the permanent magnet electron cyclotron resonance ion source at Peking University.

PubMed

Ren, H T; Peng, S X; Xu, Y; Zhao, J; Lu, P N; Chen, J; Zhang, A L; Zhang, T; Guo, Z Y; Chen, J E

2014-02-01

At Peking University (PKU) we have developed several 2.45 GHz Permanent Magnet Electron Cyclotron Resonance ion sources for PKUNIFTY, SFRFQ, Coupled RFQ&SFRFQ, and Dielectric-Wall Accelerator (DWA) projects (respectively, 50 mA of D(+), 10 mA of O(+), 10 mA of He(+), and 50 mA of H(+)). In order to improve performance of these ion sources, it is necessary to better understand the principal factors that influence the plasma density and the atomic ion fraction. Theoretical analysis about microwave transmission and cut-off inside the discharge chamber were carried out to study the influence of the discharge chamber diameters. As a consequence, experimental studies on plasma density and ion fraction with different discharge chamber sizes have been carried out. Due to the difficulties in measuring plasma density inside the discharge chamber, the output beam current was measured to reflect the plasma density. Experimental results show that the plasma density increases to the maximum and then decreases significantly as the diameter changed from 64 mm to 30 mm, and the atomic ion fraction has the same tendency. The maximum beam intensity was obtained with the diameter of 35 mm, but the maximum atomic ion fraction with a diameter of 40 mm. The experimental results are basically accordant with the theoretical calculation. Details are presented in this paper.

Vacuum Plasma Spray Forming of Tungsten Lorentz Force Accelerator Components

NASA Technical Reports Server (NTRS)

Zimmerman, Frank R.

2004-01-01

The Vacuum Plasma Spray (VPS) Laboratory at NASA's Marshall Space Flight Center, working with the Jet Propulsion Laboratory, has developed and demonstrated a fabrication technique using the VPS process to form anode and cathode sections for a Lorentz force accelerator made from tungsten. Lorentz force accelerators are an attractive form of electric propulsion that provides continuous, high-efficiency propulsion at useful power levels for such applications as orbit transfers or deep space missions. The VPS process is used to deposit refractory metals such as tungsten onto a graphite mandrel of the desired shape. Because tungsten is reactive at high temperatures, it is thermally sprayed in an inert environment where the plasma gun melts and deposits the molten metal powder onto a mandrel. A three-axis robot inside the chamber controls the motion of the plasma spray torch. A graphite mandrel acts as a male mold, forming the required contour and dimensions for the inside surface of the anode or cathode of the accelerator. This paper describes the processing techniques, design considerations, and process development associated with the VPS forming of Lorentz force accelerator components.

Gasdynamic Mirror Fusion Propulsion Experiment

NASA Technical Reports Server (NTRS)

Emrich, Bill; Rodgers, Stephen L. (Technical Monitor)

2000-01-01

A gasdynamic mirror (GDM) fusion propulsion experiment is currently being constructed at the NASA Marshall Space Flight Center (MSFC) to test the feasibility of this particular type of fusion device. Because of the open magnetic field line configuration of mirror fusion devices, they are particularly well suited for propulsion system applications since they allow for the easy ejection of thrust producing plasma. Currently, the MSFC GDM is constructed in three segments. The vacuum chamber mirror segment, the plasma injector mirror segment, and the main plasma chamber segment. Enough magnets are currently available to construct up to three main plasma chamber segments. The mirror segments are also segmented such that they can be expanded to accommodate new end plugging strategies with out requiring the disassembly of the entire mirror segment. The plasma for the experiment is generated in a microwave cavity located between the main magnets and the mirror magnets. Ion heating is accomplished through ambipolar diffusion. The objective of the experiment is to investigate the stability characteristics of the gasdynamic mirror and to map a region of parameter space within which the plasma can be confined in a stable steady state configuration. The mirror ratio, plasma density, and plasma "b" will be varied over a range of values and measurements subsequently taken to determine the degree of plasma stability.

Determination of the plasma effective charge from the soft X-ray spectrum and plasma conductivity at the L-2M stellarator after boronization of the vacuum chamber

DOE Office of Scientific and Technical Information (OSTI.GOV)

Meshcheryakov, A. I., E-mail: meshch@fpl.gpi.ru; Vafin, I. Yu., E-mail: ildar@fpl.gpi.ru

2016-07-15

Boronization of the vacuum chamber wall results in a considerable change in the composition of the plasma generated in working pulses of the L-2M stellarator and, accordingly, in the plasma effective charge. The paper presents results of measurements of the plasma effective charge carried out by two methods in the ohmic heating mode: from the data on the plasma conductivity and from the soft X-ray spectrum of plasma emission. Comparison of the values of the plasma effective charge obtained by these two methods makes it possible to determine the conditions in which the two values are in good agreement. Undermore » these conditions, the plasma effective charge can be correctly estimated from spectral measurements.« less

Negative ion source with external RF antenna

DOEpatents

Leung, Ka-Ngo; Hahto, Sami K.; Hahto, Sari T.

2007-02-13

A radio frequency (RF) driven plasma ion source has an external RF antenna, i.e. the RF antenna is positioned outside the plasma generating chamber rather than inside. The RF antenna is typically formed of a small diameter metal tube coated with an insulator. An external RF antenna assembly is used to mount the external RF antenna to the ion source. The RF antenna tubing is wound around the external RF antenna assembly to form a coil. The external RF antenna assembly is formed of a material, e.g. quartz, which is essentially transparent to the RF waves. The external RF antenna assembly is attached to and forms a part of the plasma source chamber so that the RF waves emitted by the RF antenna enter into the inside of the plasma chamber and ionize a gas contained therein. The plasma ion source is typically a multi-cusp ion source. A converter can be included in the ion source to produce negative ions.

Helicon thruster plasma modeling: Two-dimensional fluid-dynamics and propulsive performances

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ahedo, Eduardo; Navarro-Cavalle, Jaume

2013-04-15

An axisymmetric macroscopic model of the magnetized plasma flow inside the helicon thruster chamber is derived, assuming that the power absorbed from the helicon antenna emission is known. Ionization, confinement, subsonic flows, and production efficiency are discussed in terms of design and operation parameters. Analytical solutions and simple scaling laws for ideal plasma conditions are obtained. The chamber model is then matched with a model of the external magnetic nozzle in order to characterize the whole plasma flow and assess thruster performances. Thermal, electric, and magnetic contributions to thrust are evaluated. The energy balance provides the power conversion between ionsmore » and electrons in chamber and nozzle, and the power distribution among beam power, ionization losses, and wall losses. Thruster efficiency is assessed, and the main causes of inefficiency are identified. The thermodynamic behavior of the collisionless electron population in the nozzle is acknowledged to be poorly known and crucial for a complete plasma expansion and good thrust efficiency.« less

Experimental results on plasma interactions with large surfaces at high voltages

NASA Technical Reports Server (NTRS)

Grier, N. T.

1980-01-01

Multikilowatt power levels for future payloads can be more efficiently generated using solar arrays operating in the kilovolt range. This implies that large areas of the array at high operating voltages will be exposed to the space plasma environment. The resulting interactions of these high voltage surfaces with space plasma environments can seriously impact the performance of the satellite system. The plasma-surface interaction phenomena were studied in tests performed in two separate vacuum chambers, a 4.6 m diameter by 19.2 long chamber and a 20 m diameter by 27.4 m long chamber. The generated plasma density was approximately 1x10 to the 4th power/cu cm. Ten solar array panels, each with areas of 1400 sq cm were used in the tests. Nine of the solar panels were tested as a composite unit in the form of a 3x3 solar panel matrix. The results from all the tests confirmed small sample tests results: insulators were found to enhance the plasma coupling current for high positive bias and arcing was found to occur at high negative bias.

Laboratory Simulations of the Solar Wind's Effect on Surface Interactions and Plasma Wakes

NASA Astrophysics Data System (ADS)

Munsat, T. L.; Ulibarri, Z.; Han, J.; Horanyi, M.; Wang, X.; Yeo, L. H.

2016-12-01

The Colorado Solar Wind Experiment (CSWE) is a new device constructed at the Institute for Modeling Plasma, Atmospheres, and Cosmic Dust (IMPACT) at the University of Colorado. This large ion source is being developed for studies of the interaction of solar wind plasma with planetary surfaces and cosmic dust, and for the investigation of plasma wake physics. With a plasma beam diameter of 12 cm at the source, ion energies of up to 1 keV, and ion flows of up to 1 mA/cm^2, a large cross-section Kaufman Ion Source is used to create steady state plasma flow to model the solar wind in an experimental vacuum chamber. Chamber pressure can be reduced to 3x10^-5 Torr under operating conditions to suppress ion-neutral collisions and create a uniform ion velocity distribution. Diagnostic instruments such as a double Langmuir probe and an ion energy analyzer are mounted on a two-dimensional translation stage that allow the beam to be characterized throughout the chamber. Initial experimental results and technical details of the device will be explained.

Modelling of radiation impact on ITER Beryllium wall

NASA Astrophysics Data System (ADS)

Landman, I. S.; Janeschitz, G.

2009-04-01

In the ITER H-Mode confinement regime, edge localized instabilities (ELMs) will perturb the discharge. Plasma lost after each ELM moves along magnetic field lines and impacts on divertor armour, causing plasma contamination by back propagating eroded carbon or tungsten. These impurities produce enhanced radiation flux distributed mainly over the beryllium main chamber wall. The simulation of the complicated processes involved are subject of the integrated tokamak code TOKES that is currently under development. This work describes the new TOKES model for radiation transport through confined plasma. Equations for level populations of the multi-fluid plasma species and the propagation of different kinds of radiation (resonance, recombination and bremsstrahlung photons) are implemented. First simulation results without account of resonance lines are presented.

An investigation of transient pressures and plasma properties in a pinched plasma column. M.S. Thesis

NASA Technical Reports Server (NTRS)

Stover, E. K.; York, T. M.

1971-01-01

The transient pinched plasma column generated in a linear Z-pinch was studied experimentally and analytically. The plasma column was investigated experimentally with several plasma diagnostics; they were: a rapid response pressure transducer, a magnetic field probe, a voltage probe, and discharge luminosity. Axial pressure profiles on the discharge chamber axis were used to identify three characteristic regions of plasma column behavior: (1) strong axial pressure asymmetry noted early in plasma column lifetime, (2) followed by plasma heating in which there is a rapid rise in static pressure, and (3) a slight decrease static pressure before plasma column breakup. Plasma column lifetime was approximately 5 microseconds. The axial pressure asymmetry was attributed to nonsimultaneous pinching of the imploding current sheet along the discharge chamber axis. The rapid heating could be attributed in part to viscous effects introduced by radial gradients in the axial streaming velocity.

Extraction of Thermal Performance Values from Samples in the Lunar Dust Adhesion Bell Jar

NASA Technical Reports Server (NTRS)

Gaier, James R.; Siamidis, John; Larkin, Elizabeth M. G.

2008-01-01

A simulation chamber has been developed to test the performance of thermal control surfaces under dusty lunar conditions. The lunar dust adhesion bell jar (LDAB) is a diffusion pumped vacuum chamber (10(exp -8) Torr) built to test material samples less than about 7 cm in diameter. The LDAB has the following lunar dust simulant processing capabilities: heating and cooling while stirring in order to degas and remove adsorbed water; RF air-plasma for activating the dust and for organic contaminant removal; RF H/He-plasma to simulate solar wind; dust sieving system for controlling particle sizes; and a controlled means of introducing the activated dust to the samples under study. The LDAB is also fitted with an in situ Xe arc lamp solar simulator, and a cold box that can reach 30 K. Samples of thermal control surfaces (2.5 cm diameter) are introduced into the chamber for calorimetric evaluation using thermocouple instrumentation. The object of this paper is to present a thermal model of the samples under test conditions and to outline the procedure to extract the absorptance, emittance, and thermal efficiency from the pristine and sub-monolayer dust covered samples.

Extraction of Thermal Performance Values from Samples in the Lunar Dust Adhesion Bell Jar

NASA Technical Reports Server (NTRS)

Gaier, James R.; Siamidis, John; Larkin, Elizabeth M.G.

2008-01-01

A simulation chamber has been developed to test the performance of thermal control surfaces under dusty lunar conditions. The lunar dust adhesion bell jar (LDAB) is a diffusion pumped vacuum chamber (10-8 Torr) built to test material samples less than about 7 cm in diameter. The LDAB has the following lunar dust stimulant processing capabilities: heating and cooling while stirring in order to degas and remove absorbed water; RF air-plasma for activating the dust and for organic contaminant removal; RF H/He-plasma to simulate solar wind; dust sieving system for controlling particle sizes; and a controlled means of introducing the activated dust to the samples under study. The LDAB is also fitted with an in situ Xe arc lamp solar simulator, and a cold box that can reach 30 K. Samples of thermal control surfaces (2.5 cm diameter) are introduced into the chamber for calorimetric evaluation using thermocouple instrumentation. The object of this paper is to present a thermal model of the samples under test conditions, and to outline the procedure to extract the absorptance, emittance, and thermal efficiency from the pristine and sub-monolayer dust covered samples

Extraction of Thermal Performance Values from Samples in the Lunar Dust Adhesion Bell Jar

NASA Technical Reports Server (NTRS)

Gaier, James R.; Siamidis, John; Larkin, Elizabeth M. G.

2010-01-01

A simulation chamber has been developed to test the performance of thermal control surfaces under dusty lunar conditions. The lunar dust adhesion bell jar (LDAB) is a diffusion pumped vacuum chamber (10(exp -8) Torr) built to test material samples less than about 7 cm in diameter. The LDAB has the following lunar dust simulant processing capabilities: heating and cooling while stirring in order to degas and remove adsorbed water; RF air-plasma for activating the dust and for organic contaminant removal; RF H/He-plasma to simulate solar wind; dust sieving system for controlling particle sizes; and a controlled means of introducing the activated dust to the samples under study. The LDAB is also fitted with an in situ Xe arc lamp solar simulator, and a cold box that can reach 30 K. Samples of thermal control surfaces (2.5 cm diameter) are introduced into the chamber for calorimetric evaluation using thermocouple instrumentation. The object of this paper is to present a thermal model of the samples under test conditions and to outline the procedure to extract the absorptance, emittance, and thermal efficiency from the pristine and sub-monolayer dust covered samples.

The effect of lithium on electrolyte transport by the in situ choroid plexus of the cat.

PubMed Central

Reed, D J; Yen, M H

1980-01-01

1. The effects of lithium on electrolyte transport were studied by using the cat choroid plexus isolated in a chamber in situ. 2. Lithium infused intravenously to produce plasma lithium concentrations up to 5 m-equiv/l. caused an increase in plasma magnesium with no effect on the concentration of magnesium in the chamber fluid. 3. When 22NaCl was infused intravenously the chamber fluid/plasma ratio of 22Na was nearly 1 in the first 30 min sample and at the steady state it was significantly greater than 1. 4. When lithium chloride (1.5 m-equiv/l.) or potassium chloride (6.6 m-equiv/l.) was added to the chamber at the start of a collection period with plasma 22Na in the steady state, the 22Na content of the chamber fluid promptly increased 118 and 68%, respectively, above the control value with no increase in secretory rate. 5. The addition of ouabain to the chamber fluid, in addition to the lithium chloride or potassium chloride, tended to stimulate or have no significant effect on 22Na uptake at a concentration of 10(-5) M and to reduce it as well as the secretory rate at 10(-3) M. 6. The date are compatible with there being two functionally separate sodium transport systems in the choroid plexus. One transports sodium accompanied by an anion and water to provide the fluid secreted into the chamber (c.s.f.) and the other operates primarily to regulate the potassium concentration of the c.s.f. by pumping potassium out in exchange for sodium. 7. Lithium can be transported by both systems to a limited extent and the presence of lithium in the c.s.f. stimulates the sodium-potassium regulating pump. PMID:7252869

Plasma confinement system and methods for use

DOEpatents

Jarboe, Thomas R.; Sutherland, Derek

2017-09-05

A plasma confinement system is provided that includes a confinement chamber that includes one or more enclosures of respective helicity injectors. The one or more enclosures are coupled to ports at an outer radius of the confinement chamber. The system further includes one or more conductive coils aligned substantially parallel to the one or more enclosures and a further set of one or more conductive coils respectively surrounding portions of the one or more enclosures. Currents may be provided to the sets of conductive coils to energize a gas within the confinement chamber into a plasma. Further, a heat-exchange system is provided that includes an inner wall, an intermediate wall, an outer wall, and pipe sections configured to carry coolant through cavities formed by the walls.

An extended CFD model to predict the pumping curve in low pressure plasma etch chamber

NASA Astrophysics Data System (ADS)

Zhou, Ning; Wu, Yuanhao; Han, Wenbin; Pan, Shaowu

2014-12-01

Continuum based CFD model is extended with slip wall approximation and rarefaction effect on viscosity, in an attempt to predict the pumping flow characteristics in low pressure plasma etch chambers. The flow regime inside the chamber ranges from slip wall (Kn ˜ 0.01), and up to free molecular (Kn = 10). Momentum accommodation coefficient and parameters for Kn-modified viscosity are first calibrated against one set of measured pumping curve. Then the validity of this calibrated CFD models are demonstrated in comparison with additional pumping curves measured in chambers of different geometry configurations. More detailed comparison against DSMC model for flow conductance over slits with contraction and expansion sections is also discussed.

Rotor assembly and assay method

DOEpatents

Burtis, C.A.; Johnson, W.F.; Walker, W.A.

1993-09-07

A rotor assembly for carrying out an assay includes a rotor body which is rotatable about an axis of rotation, and has a central chamber and first, second, third, fourth, fifth, and sixth chambers which are in communication with and radiate from the central chamber. The rotor assembly further includes a shuttle which is movable through the central chamber and insertable into any of the chambers, the shuttle including a reaction cup carrying an immobilized antigen or an antibody for transport among the chambers. A method for carrying out an assay using the rotor assembly includes moving the reaction cup among the six chambers by passing the cup through the central chamber between centrifugation steps in order to perform the steps of: separating plasma from blood cells, binding plasma antibody or antigen, washing, drying, binding enzyme conjugate, reacting with enzyme substrate and optically comparing the resulting reaction product with unreacted enzyme substrate solution. The movement of the reaction cup can be provided by attaching a magnet to the reaction cup and supplying a moving magnetic field to the rotor. 34 figures.

Rotor assembly and assay method

DOEpatents

Burtis, Carl A.; Johnson, Wayne F.; Walker, William A.

1993-01-01

A rotor assembly for carrying out an assay includes a rotor body which is rotatable about an axis of rotation, and has a central chamber and first, second, third, fourth, fifth, and sixth chambers which are in communication with and radiate from the central chamber. The rotor assembly further includes a shuttle which is movable through the central chamber and insertable into any of the chambers, the shuttle including a reaction cup carrying an immobilized antigen or an antibody for transport among the chambers. A method for carrying out an assay using the rotor assembly includes moving the reaction cup among the six chambers by passing the cup through the central chamber between centrifugation steps in order to perform the steps of: separating plasma from blood cells, binding plasma antibody or antigen, washing, drying, binding enzyme conjugate, reacting with enzyme substrate and optically comparing the resulting reaction product with unreacted enzyme substrate solution. The movement of the reaction cup can be provided by attaching a magnet to the reaction cup and supplying a moving magnetic field to the rotor.

Experimental characterization of hollow-cathode plasma sources at Frascati

NASA Technical Reports Server (NTRS)

Vannaroni, G.; Cosmovici, C. B.; Bonifazi, C.; Mccoy, J.

1988-01-01

An experimental characterization has been conducted for hollow cathodes applicable as plasma contactors on Space Shuttle-based experiments. The diagnostics tests were conducted in an 0.5 cu m vacuum chamber by means of Langmuir probes at various distances from the source. Two electron populations are noted, one in the 0.3-1 eV and the other in the 7-11 eV temperature range. Current developments in the design of plasma chambers incorporating magnetic field compensation are noted.

Multi-cathode metal vapor arc ion source

DOEpatents

Brown, Ian G.; MacGill, Robert A.

1988-01-01

An ion generating apparatus utilizing a vacuum chamber, a cathode and an anode in the chamber. A source of electrical power produces an arc or discharge between the cathode and anode. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma is directed to an extractor which separates the electrons from the plasma, and accelerates the ions to produce an ion beam. One embodiment of the appaatus utilizes a multi-cathode arrangement for interaction with the anode.

Focused electron and ion beam systems

DOEpatents

Leung, Ka-Ngo; Reijonen, Jani; Persaud, Arun; Ji, Qing; Jiang, Ximan

2004-07-27

An electron beam system is based on a plasma generator in a plasma ion source with an accelerator column. The electrons are extracted from a plasma cathode in a plasma ion source, e.g. a multicusp plasma ion source. The beam can be scanned in both the x and y directions, and the system can be operated with multiple beamlets. A compact focused ion or electron beam system has a plasma ion source and an all-electrostatic beam acceleration and focusing column. The ion source is a small chamber with the plasma produced by radio-frequency (RF) induction discharge. The RF antenna is wound outside the chamber and connected to an RF supply. Ions or electrons can be extracted from the source. A multi-beam system has several sources of different species and an electron beam source.

Toroidal midplane neutral beam armor and plasma limiter

DOEpatents

Kugel, Henry W.; Hand Jr, Samuel W.; Ksayian, Haig

1986-02-04

For use in a tokamak fusion reactor having a midplane magnetic coil on the inner wall of an evacuated toriodal chamber within which a neutral beam heated, fusing plasma is magnetically confined, a neutral beam armor shield and plasma limiter is provided on the inner wall of the toroidal chamber to shield the midplane coil from neutral beam shine-thru and plasma deposition. The armor shield/plasma limiter forms a semicircular enclosure around the midplane coil with the outer surface of the armor shield/plasma limiter shaped to match, as closely as practical, the inner limiting magnetic flux surface of the toroidally confined, indented, bean-shaped plasma. The armor shield/plasma limiter includes a plurality of semicircular graphite plates each having a pair of coupled upper and lower sections with each plate positioned in intimate contact with an adjacent plate on each side thereof so as to form a closed, planar structure around the entire outer periphery of the circular midplane coil. The upper and lower plate sections are adapted for coupling to heat sensing thermocouples and to a circulating water conduit system for cooling the armor shield/plasma limiter.The inner center portion of each graphite plate is adapted to receive and enclose a section of a circular diagnostic magnetic flux loop so as to minimize the power from the plasma confinement chamber incident upon the flux loop.

Toroidal midplane neutral beam armor and plasma limiter

DOEpatents

Kugel, Henry W.; Hand, Jr, Samuel W.; Ksayian, Haig

1986-01-01

For use in a tokamak fusion reactor having a midplane magnetic coil on the inner wall of an evacuated toriodal chamber within which a neutral beam heated, fusing plasma is magnetically confined, a neutral beam armor shield and plasma limiter is provided on the inner wall of the toroidal chamber to shield the midplane coil from neutral beam shine-thru and plasma deposition. The armor shield/plasma limiter forms a semicircular enclosure around the midplane coil with the outer surface of the armor shield/plasma limiter shaped to match, as closely as practical, the inner limiting magnetic flux surface of the toroidally confined, indented, bean-shaped plasma. The armor shield/plasma limiter includes a plurality of semicircular graphite plates each having a pair of coupled upper and lower sections with each plate positioned in intimate contact with an adjacent plate on each side thereof so as to form a closed, planar structure around the entire outer periphery of the circular midplane coil. The upper and lower plate sections are adapted for coupling to heat sensing thermocouples and to a circulating water conduit system for cooling the armor shield/plasma limiter.The inner center portion of each graphite plate is adapted to receive and enclose a section of a circular diagnostic magnetic flux loop so as to minimize the power from the plasma confinement chamber incident upon the flux loop.

Design Considerations in Capacitively Coupled Plasmas

NASA Astrophysics Data System (ADS)

Song, Sang-Heon; Ventzek, Peter; Ranjan, Alok

2015-11-01

Microelectronics industry has driven transistor feature size scaling from 10-6 m to 10-9 m during the past 50 years, which is often referred to as Moore's law. It cannot be overstated that today's information technology would not have been so successful without plasma material processing. One of the major plasma sources for the microelectronics fabrication is capacitively coupled plasmas (CCPs). The CCP reactor has been intensively studied and developed for the deposition and etching of different films on the silicon wafer. As the feature size gets to around 10 nm, the requirement for the process uniformity is less than 1-2 nm across the wafer (300 mm). In order to achieve the desired uniformity, the hardware design should be as precise as possible before the fine tuning of process condition is applied to make it even better. In doing this procedure, the computer simulation can save a significant amount of resources such as time and money which are critical in the semiconductor business. In this presentation, we compare plasma properties using a 2-dimensional plasma hydrodynamics model for different kinds of design factors that can affect the plasma uniformity. The parameters studied in this presentation include chamber accessing port, pumping port, focus ring around wafer substrate, and the geometry of electrodes of CCP.

A DOE/Fusion Energy Sciences Research/Education Program at PVAMU Study of Rotamak Plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Huang, Tian-Sen; Saganti, Premkumar

During recent years (2004-2015), with DOE support, the PVAMU plasma research group accomplished new instrumentation development, conducted several new plasma experiments, and is currently poised to advance with standing-wave microwave plasma propulsion research. On the instrumentation development, the research group completed: (i) building a new plasma chamber with metal CF flanges, (ii) setting up of a 6kW/2450MHz microwave input system as an additional plasma heating source at our rotamak plasma facility, (iii) installation of one programmatic Kepco ATE 6-100DMG fast DC current supply system used in rotamak plasma shape control experiment, built a new microwave, standing-wave experiment chamber and (iv)more » established a new plasma lab with field reversal configuration capability utilizing 1MHz/200kW RF (radio frequency) wave generator. Some of the new experiments conducted in this period also include: (i) assessment of improved magnetic reconnection at field-reversed configuration (FRC) plasma, (ii) introduction of microwave heating experiments, and (iii) suppression of n = 1 tilt instability by one coil with a smaller current added inside the rotamak’s central pipe. These experiments led to publications in Physical Review Letters, Reviews of Scientific Instruments, Division of Plasma Physics (DPP) of American Physical Society (APS) Reports, Physics of Plasmas Controlled Fusion, and Physics of Plasmas (between 2004 and 2015). With these new improvements and advancements, we also initiated and accomplished design and fabrication of a plasma propulsion system. Currently, we are assembling a plasma propulsion experimental system that includes a 5kW helicon plasma source, a 25 cm diameter plasma heating chamber with 1MHz/200kW RF power rotating magnetic field, and a 60 cm diameter plasma exhaust chamber, and expect to achieve a plasma mass flow of 0.1g/s with 60km/s ejection. We anticipate several propulsion applications in near future as we advance our capabilities. Apart from scientific staff members, several students (more than ten undergraduate students and two graduate students from several engineering and science disciplines) were supported and worked on the equipment and experiments during the award period. We also anticipate that these opportunities with current expansions may result in a graduate program in plasma science and propulsion engineering disciplines. *Corresponding Author – Dr. Saganti, Regents Professor and Professor of Physics – pbsaganti@pvamu.edu« less

The Colorado Solar Wind Experiment

NASA Astrophysics Data System (ADS)

Munsat, Tobin; Han, Jia; Horanyi, Mihaly; Ulibarri, Zach; Wang, Xu; Yeo, Lihsia

2016-10-01

The Colorado Solar Wind Experiment (CSWE) is a new device developed at the Institute for Modeling Plasma, Atmospheres, and Cosmic Dust (IMPACT) at the University of Colorado. This large ion source is for studies of the interaction of solar wind plasma with planetary surfaces and cosmic dust, and for the investigation of plasma wake physics. With a plasma beam diameter of 12 cm at the source, ion energies of up to 1 keV, and ion flows of up to 1 mA/cm2, a large cross-section Kaufman Ion Source is used to create steady state plasma flow to model the solar wind in an experimental vacuum chamber. Chamber pressure can be reduced to 3e-5 Torr under operating conditions to suppress ion-neutral collisions and create a uniform ion velocity distribution. Diagnostic instruments such as a double Langmuir probe and an ion energy analyzer are mounted on a two-dimensional translation stage that allow the beam to be characterized throughout the chamber. Early experiments include the measurement of dust grain charging from the interaction with flowing plasma, and measurements of the plasma sheath created by the interaction of the flowing plasma impinging on a surface with a dipole magnetic field. This poster will describe the facility and the scientific results obtained to date.

Formation of Cosmic Carbon Dust Analogues in Plasma Reactors

NASA Technical Reports Server (NTRS)

Salama, Farid

2016-01-01

Cosmic carbon dust analogs are produced, processed and analyzed in the laboratory using NASA's COSmIC (COSmIC Simulation Chamber) Facility. These experiments can be used to derive information on the most efficient molecular precursors in the chemical pathways that eventually lead to the formation of carbonaceous grains in the stellar envelopes of carbon stars.

Robust Low Cost Liquid Rocket Combustion Chamber by Advanced Vacuum Plasma Process

NASA Technical Reports Server (NTRS)

Holmes, Richard; Elam, Sandra; Ellis, David L.; McKechnie, Timothy; Hickman, Robert; Rose, M. Franklin (Technical Monitor)

2001-01-01

Next-generation, regeneratively cooled rocket engines will require materials that can withstand high temperatures while retaining high thermal conductivity. Fabrication techniques must be cost efficient so that engine components can be manufactured within the constraints of shrinking budgets. Three technologies have been combined to produce an advanced liquid rocket engine combustion chamber at NASA-Marshall Space Flight Center (MSFC) using relatively low-cost, vacuum-plasma-spray (VPS) techniques. Copper alloy NARloy-Z was replaced with a new high performance Cu-8Cr-4Nb alloy developed by NASA-Glenn Research Center (GRC), which possesses excellent high-temperature strength, creep resistance, and low cycle fatigue behavior combined with exceptional thermal stability. Functional gradient technology, developed building composite cartridges for space furnaces was incorporated to add oxidation resistant and thermal barrier coatings as an integral part of the hot wall of the liner during the VPS process. NiCrAlY, utilized to produce durable protective coating for the space shuttle high pressure fuel turbopump (BPFTP) turbine blades, was used as the functional gradient material coating (FGM). The FGM not only serves as a protection from oxidation or blanching, the main cause of engine failure, but also serves as a thermal barrier because of its lower thermal conductivity, reducing the temperature of the combustion liner 200 F, from 1000 F to 800 F producing longer life. The objective of this program was to develop and demonstrate the technology to fabricate high-performance, robust, inexpensive combustion chambers for advanced propulsion systems (such as Lockheed-Martin's VentureStar and NASA's Reusable Launch Vehicle, RLV) using the low-cost VPS process. VPS formed combustion chamber test articles have been formed with the FGM hot wall built in and hot fire tested, demonstrating for the first time a coating that will remain intact through the hot firing test, and with no apparent wear. Material physical properties and the hot firing tests are reviewed.

Highly selective dry etching of GaP in the presence of AlxGa1–xP with a SiCl4/SF6 plasma

NASA Astrophysics Data System (ADS)

Hönl, Simon; Hahn, Herwig; Baumgartner, Yannick; Czornomaz, Lukas; Seidler, Paul

2018-05-01

We present an inductively coupled-plasma reactive-ion etching process that simultaneously provides both a high etch rate and unprecedented selectivity for gallium phosphide (GaP) in the presence of aluminum gallium phosphide (AlxGa1–xP). Utilizing mixtures of silicon tetrachloride (SiCl4) and sulfur hexafluoride (SF6), selectivities exceeding 2700:1 are achieved at GaP etch rates above 3000 nm min‑1. A design of experiments has been employed to investigate the influence of the inductively coupled-plasma power, the chamber pressure, the DC bias and the ratio of SiCl4 to SF6. The process enables the use of thin AlxGa1–xP stop layers even at aluminum contents of a few percent.

Plasma-wall interaction in laser inertial fusion reactors: novel proposals for radiation tests of first wall materials

NASA Astrophysics Data System (ADS)

Alvarez Ruiz, J.; Rivera, A.; Mima, K.; Garoz, D.; Gonzalez-Arrabal, R.; Gordillo, N.; Fuchs, J.; Tanaka, K.; Fernández, I.; Briones, F.; Perlado, J.

2012-12-01

Dry-wall laser inertial fusion (LIF) chambers will have to withstand strong bursts of fast charged particles which will deposit tens of kJ m-2 and implant more than 1018 particles m-2 in a few microseconds at a repetition rate of some Hz. Large chamber dimensions and resistant plasma-facing materials must be combined to guarantee the chamber performance as long as possible under the expected threats: heating, fatigue, cracking, formation of defects, retention of light species, swelling and erosion. Current and novel radiation resistant materials for the first wall need to be validated under realistic conditions. However, at present there is a lack of facilities which can reproduce such ion environments. This contribution proposes the use of ultra-intense lasers and high-intense pulsed ion beams (HIPIB) to recreate the plasma conditions in LIF reactors. By target normal sheath acceleration, ultra-intense lasers can generate very short and energetic ion pulses with a spectral distribution similar to that of the inertial fusion ion bursts, suitable to validate fusion materials and to investigate the barely known propagation of those bursts through background plasmas/gases present in the reactor chamber. HIPIB technologies, initially developed for inertial fusion driver systems, provide huge intensity pulses which meet the irradiation conditions expected in the first wall of LIF chambers and thus can be used for the validation of materials too.

Characterization and global modelling of low-pressure hydrogen-based RF plasmas suitable for surface cleaning processes

NASA Astrophysics Data System (ADS)

Škoro, Nikola; Puač, Nevena; Lazović, Saša; Cvelbar, Uroš; Kokkoris, George; Gogolides, Evangelos

2013-11-01

In this paper we present results of measurements and global modelling of low-pressure inductively coupled H2 plasma which is suitable for surface cleaning applications. The plasma is ignited at 1 Pa in a helicon-type reactor and is characterized using optical emission measurements (optical actinometry) and electrical measurements, namely Langmuir and catalytic probe. By comparing catalytic probe data obtained at the centre of the chamber with optical actinometry results, an approximate calibration of the actinometry method as a semi-quantititative measure of H density was achieved. Coefficients for conversion of actinometric ratios to H densities are tabulated and provided. The approximate validity region of the simple actinometry formula for low-pressure H2 plasma is discussed in the online supplementary data (stacks.iop.org/JPhysD/46/475206/mmedia). Best agreement with catalytic probe results was obtained for (Hβ, Ar750) and (Hβ, Ar811) actinometric line pairs. Additionally, concentrations of electrons and ions as well as plasma potential, electron temperature and ion fluxes were measured in the chamber centre at different plasma powers using a Langmuir probe. Moreover, a global model of an inductively coupled plasma was formulated using a compiled reaction set for H2/Ar gas mixture. The model results compared reasonably well with the results on H atom and charge particle densities and a sensitivity analysis of important input parameters was conducted. The influence of the surface recombination, ionization, and dissociation coefficients, and the ion-neutral collision cross-section on model results was demonstrated.

Diamond film growth argon-carbon plasmas

DOEpatents

Gruen, Dieter M.; Krauss, Alan R.; Liu, Shengzhong; Pan, Xianzheng; Zuiker, Christopher D.

1998-01-01

A method and system for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate.

A microwave plasma torch and its applications

NASA Astrophysics Data System (ADS)

Uhm, H. S.; Hong, Y. C.; Shin, D. H.

2006-05-01

A portable microwave plasma torch at atmospheric pressure by making use of magnetrons operated at 2.45 GHz and used in a home microwave oven has been developed. This electrodeless torch can be used in various areas including commercial, environmental and military applications. For example, perfluorocompounds (PFCs), which have long lifetimes and serious global warming implications, are widely used during plasma etching and plasma-assisted chamber cleaning processes in chemical vapour deposition systems. The microwave torch effectively eliminates PFCs. Efficient decomposition of toluene gas indicates the effectiveness of volatile organic compound eliminations from industrial emission and the elimination of airborne chemical and biological warfare agents. The microwave torch has been used to synthesize carbon nanotubes in an on-line system, thereby providing the opportunity of mass production of the nanotubes. There are other applications of the microwave plasma torch.

Frequency up-conversion of a high-power microwave pulse propagating in a self-generated plasma

NASA Technical Reports Server (NTRS)

Kuo, S. P.; Ren, A.

1992-01-01

In the study of the propagation of a high-power microwave pulse, one of the main concerns is how to minimize the energy loss of the pulse before reaching the destination. A frequency autoconversion process that can lead to reflectionless propagation of powerful electromagnetic pulses in self-generated plasmas is studied. The theory shows that, under the proper condition, the carrier frequency omega of the pulse shifts upward during the growth of local plasma frequency omega(pe). Thus, the self-generated plasma remains underdense to the pulse. A chamber experiment to demonstrate the frequency autoconversion during the pulse propagation through the self-generated plasma is conducted. The detected frequency shift is compared with the theoretical result calculated by using the measured electron density distribution along the propagation path of the pulse. Good agreement is obtained.

SOLVING THE STAND-OFF PROBLEM FOR MAGNETIZED TARGET FUSION: PLASMA STREAMS AS DISPOSABLE ELECTRODES, PLUS A LOCAL SPHERICAL BLANKET

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ryutov, D D; Thio, Y F

In a fusion reactor based on the Magnetized Target Fusion approach, the permanent power supply has to deliver currents up to a few mega-amperes to the target dropped into the reaction chamber. All the structures situated around the target will be destroyed after every pulse and have to be replaced at a frequency of 1 to 10 Hz. In this paper, an approach based on the use of spherical blanket surrounding the target, and pulsed plasma electrodes connecting the target to the power supply, is discussed. A brief physic analysis of the processes associated with creation of plasma electrodes ismore » discussed.« less

Laboratory simulation of the interaction between a tethered satellite system and the ionosphere

NASA Astrophysics Data System (ADS)

Vannaroni, G.; Giovi, R.; de Venuto, F.

1992-10-01

The authors report on the measurements performed in the IFSI/CNR plasma chamber at Frascati related to the laboratory investigation of the interaction between a plasma source and an ambient plasma of ionospheric type. Such an interaction is of relevant interest for the possibility of using electrodynamic tethered satellite systems, orbiting at ionospheric altitude, for generating electric power or propulsion in space. The interaction region was analyzed at various conditions of ambient magnetic field (/0-0.5/ G) and at different polarization levels of the plasma source (/0-40/ V). The plasma measurements were carried out with a diagnostic system using an array of Langmuir probes movable in the chamber so that a map of the plasma parameters could be obtained at the different experimental conditions.

Pre-launch simulation experiment of microwave-ionosphere nonlinear interaction rocket experiment in the space plasma chamber

NASA Astrophysics Data System (ADS)

Kaya, N.; Tsutsui, M.; Matsumoto, H.; Kimura, I.

1980-09-01

A pre-flight test experiment of a microwave-ionosphere nonlinear interaction rocket experiment (MINIX) has been carried out in a space plasma simulation chamber. Though the first rocket experiment ended up in failure because of a high voltage trouble, interesting results are observed in the pre-flight experiment. A significant microwave heating of plasma up to 300% temperature increase is observed. Strong excitations of plasma waves by the transmitted microwaves in the VLF and HF range are observed as well. These microwave effects may have to be taken into account in solar power satellite projects in the future.

Properties of radio-frequency heated argon confined uranium plasmas

NASA Technical Reports Server (NTRS)

1976-01-01

Pure uranium hexafluoride (UF6) was injected into an argon confined, steady state, rf-heated plasma within a fused silica peripheral wall test chamber. Exploratory tests conducted using an 80 kW rf facility and different test chamber flow configurations permitted selection of the configuration demonstrating the best confinement characteristics and minimum uranium compound wall coating. The overall test results demonstrated applicable flow schemes and associated diagnostic techniques were developed for the fluid mechanical confinement and characterization of uranium within an rf plasma discharge when pure UF6 is injected for long test times into an argon-confined, high-temperature, high-pressure, rf-heated plasma.

Spherical neutron generator

DOEpatents

Leung, Ka-Ngo

2006-11-21

A spherical neutron generator is formed with a small spherical target and a spherical shell RF-driven plasma ion source surrounding the target. A deuterium (or deuterium and tritium) ion plasma is produced by RF excitation in the plasma ion source using an RF antenna. The plasma generation region is a spherical shell between an outer chamber and an inner extraction electrode. A spherical neutron generating target is at the center of the chamber and is biased negatively with respect to the extraction electrode which contains many holes. Ions passing through the holes in the extraction electrode are focused onto the target which produces neutrons by D-D or D-T reactions.

Development of a plasma driven permeation experiment for TPE

DOE PAGES

Buchenauer, Dean; Kolasinski, Robert; Shimada, Masa; ...

2014-04-18

Experiments on retention of hydrogen isotopes (including tritium) at temperatures less than 800 ?C have been carried out in the Tritium Plasma Experiment (TPE) at Idaho National Laboratory [1,2]. To provide a direct measurement of plasma driven permeation in plasma facing materials at temperatures reaching 1000 ?C, a new TPE membrane holder has been built to hold test specimens (=1 mm in thickness) at high temperature while measuring tritium permeating through the membrane from the plasma facing side. This measurement is accomplished by employing a carrier gas that transports the permeating tritium from the backside of the membrane to ionmore » chambers giving a direct measurement of the plasma driven tritium permeation rate. Isolation of the membrane cooling and sweep gases from TPE’s vacuum chamber has been demonstrated by sealing tests performed up to 1000 ?C of a membrane holder design that provides easy change out of membrane specimens between tests. Simulations of the helium carrier gas which transports tritium to the ion chamber indicate a very small pressure drop (~700 Pa) with good flow uniformity (at 1000 sccm). Thermal transport simulations indicate that temperatures up to 1000 ?C are expected at the highest TPE fluxes.« less

Performance of a green propellant thruster with discharge plasma

NASA Astrophysics Data System (ADS)

Shindo, Takahiro; Wada, Asato; Maeda, Hiroshi; Watanabe, Hiroki; Takegahara, Haruki

2017-02-01

A discharge plasma was applied to initiate the combustion of a hydroxylammonium nitrate-based propellant as a substitute for the catalysts that are typically employed. The resulting thrust and thrust-to-power ratio during short interval firing tests as well as the chamber pressure with a single pulse discharge were evaluated. A 1.5-s firing test generated a maximum thrust of 322 mN along with a thrust-to-power ratio of 0.95 mN/W. During the single-pulse discharge trials, pulsed discharge capacitor energies of 5.4, 10.8, and 16.4 J were assessed, and the maximum chamber pressure was found to increase as the energy was raised. The maximum chamber pressures varied widely between experimental trials, and a 16.4-J energy value resulted in the highest chamber pressure of over 1 MPaG. The time spans between the pulsed discharge and the peak chamber pressure were in the range of 1-2 ms, representing a chamber pressure increase rate much higher than those obtained with standard catalysts.

Compact neutron generator

DOEpatents

Leung, Ka-Ngo; Lou, Tak Pui

2005-03-22

A compact neutron generator has at its outer circumference a toroidal shaped plasma chamber in which a tritium (or other) plasma is generated. A RF antenna is wrapped around the plasma chamber. A plurality of tritium ion beamlets are extracted through spaced extraction apertures of a plasma electrode on the inner surface of the toroidal plasma chamber and directed inwardly toward the center of neutron generator. The beamlets pass through spaced acceleration and focusing electrodes to a neutron generating target at the center of neutron generator. The target is typically made of titanium tubing. Water is flowed through the tubing for cooling. The beam can be pulsed rapidly to achieve ultrashort neutron bursts. The target may be moved rapidly up and down so that the average power deposited on the surface of the target may be kept at a reasonable level. The neutron generator can produce fast neutrons from a T-T reaction which can be used for luggage and cargo interrogation applications. A luggage or cargo inspection system has a pulsed T-T neutron generator or source at the center, surrounded by associated gamma detectors and other components for identifying explosives or other contraband.

Studies of beam plasma interactions in a space simulation chamber using prototype Space Shuttle instruments

NASA Technical Reports Server (NTRS)

Banks, P. M.; Raitt, W. J.; Denig, W. F.

1982-01-01

In March, 1981, electron beam experiments were conducted in a large space simulation chamber using equipment destined to be flown aboard NASA's Office of Space Science-1 pallet (OSS-1). Two major flight experiments were involved. They include the Vehicle Charging and Potential (VCAP) experiment and the Plasma Diagnostics Package (PDP). Apparatus connected with VCAP included a Fast Pulse Electron Gun (FPEG), and a Charge and Current Probe (CCP). A preliminary view is provided of the results obtained when the electron emissions were held steady over relatively long periods of time such that steady state conditions could be obtained with respect to the electron beam interaction with the neutral gases and plasma of the vacuum chamber. Of particular interest was the plasma instability feature known as the Beam Plasma Discharge. For the present experiments the FPEG was used in a dc mode with a range of currents of 2 to 80 mA at a beam energy of 970 eV. Attention is given to the emissions of VLF and HF noise associated with the dc beam.

Constricted glow discharge plasma source

DOEpatents

Anders, Andre; Anders, Simone; Dickinson, Michael; Rubin, Michael; Newman, Nathan

2000-01-01

A constricted glow discharge chamber and method are disclosed. The polarity and geometry of the constricted glow discharge plasma source is set so that the contamination and energy of the ions discharged from the source are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The source is suitable for applying films of nitrides such as gallium nitride and oxides such as tungsten oxide and for enriching other substances in material surfaces such as oxygen and water vapor, which are difficult process as plasma in any known devices and methods. The source can also be used to assist the deposition of films such as metal films by providing low-energy ions such as argon ions.

Charge exchange molecular ion source

DOEpatents

Vella, Michael C.

2003-06-03

Ions, particularly molecular ions with multiple dopant nucleons per ion, are produced by charge exchange. An ion source contains a minimum of two regions separated by a physical barrier and utilizes charge exchange to enhance production of a desired ion species. The essential elements are a plasma chamber for production of ions of a first species, a physical separator, and a charge transfer chamber where ions of the first species from the plasma chamber undergo charge exchange or transfer with the reactant atom or molecules to produce ions of a second species. Molecular ions may be produced which are useful for ion implantation.

APPARATUS FOR THE DENSIFICATION AND ENERGIZATION OF CHARGED PARTICLES

DOEpatents

Post, R.F.; Coensgen, F.H.

1962-12-18

This patent relates to a device for materially increasing the energy and density of a plasma to produce conditions commensurate with the establishment and promotion of controlled thermonuclear reactions. To this end the device employs three successive stages of magnetic compression, each stage having magnetic mirrors to compress a plasma, the mirrors being moveable to transfer the plasma to successive stages for further compression. Accordingly, a plasma introduced to the first stage is increased in density and energy in stepwide fashion by virtue of the magnetic compression in the successive stages such that the plasma upon reaching the last stage is of extremely high energy and density commensurate the plasma particles undergoing thermonuclear reactions. The principal novelty of the device resides in the provision of a unidirectional magnetic field which increases in stepwise fashion in coaxially communicating compression chambers of progressively decreasing lengths and diameters. Pulsed magnetic fields are superimposed upon the undirectional field and are manipulated to establish resultant magnetic compression fields which increase in intensity and progressively move, with respect to time, through the compression chambers in the direction of the smallest one thereof. The resultant field in the last compression chamber is hence of relatively high intensity, and the density and energy of the plasma confined therein are correspondingly high. (AEC)

New Large Diameter RF Complex Plasma Device

NASA Astrophysics Data System (ADS)

Meyer, John; Nosenko, Volodymyr; Thomas, Hubertus

2016-10-01

The Complex Plasma Research Group at the German Aerospace Center (DLR) in Oberpfaffenhofen has built a new large diameter rf plasma setup for dusty plasma experiments. The vacuum chamber is a stainless steel cylinder 0.90 m in diameter and 0.34 m in height with ports for viewing and measurement. A 0.85 m diameter plate in about the center serves as a powered electrode (13.56 MHz) with the chamber walls as the ground. It is pumped on by one of two Oerlikon turbo pumps with a pumping rate of 1100 l/s or 270 l/s. Argon gas is admitted into the chamber by an MKS mass flow meter and pumping is regulated by a butterfly valve to set pressure for experiments. A manual dropper is used to insert dust into the plasma. The dust is illuminated horizontally by a 660 nm 100 mW laser sheet and viewed from above by a Photron FASTCAM 1024 PCI camera. A vertical laser sheet of 635 nm will be used for side imaging. So far, single-layer plasma crystals of up to 15000 particles have been suspended. The particle velocity fluctuation spectra were measured and from these, the particle charge and screening length were calculated. Future experiments will explore the system-size dependence of the plasma crystal properties.

Modular hybrid plasma reactor and related systems and methods

DOEpatents

Kong, Peter C.; Grandy, Jon D.; Detering, Brent A.

2010-06-22

A device, method and system for generating a plasma is disclosed wherein an electrical arc is established and the movement of the electrical arc is selectively controlled. In one example, modular units are coupled to one another to collectively define a chamber. Each modular unit may include an electrode and a cathode spaced apart and configured to generate an arc therebetween. A device, such as a magnetic or electromagnetic device, may be used to selectively control the movement of the arc about a longitudinal axis of the chamber. The arcs of individual modules may be individually controlled so as to exhibit similar or dissimilar motions about the longitudinal axis of the chamber. In another embodiment, an inlet structure may be used to selectively define the flow path of matter introduced into the chamber such that it travels in a substantially circular or helical path within the chamber.

Apparatus and method to enhance X-ray production in laser produced plasmas

DOEpatents

Augustoni, Arnold L.; Gerardo, James B.; Raymond, Thomas D.

1992-01-01

Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser.

Diamond film growth argon-carbon plasmas

DOEpatents

Gruen, D.M.; Krauss, A.R.; Liu, S.Z.; Pan, X.Z.; Zuiker, C.D.

1998-12-15

A method and system are disclosed for manufacturing diamond film. The method involves forming a carbonaceous vapor, providing a gas stream of argon, hydrogen and hydrocarbon and combining the gas with the carbonaceous vapor, passing the combined carbonaceous vapor and gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the carbonaceous and deposition of a diamond film on a substrate. 29 figs.

Optical emission diagnostics of plasmas in chemical vapor deposition of single-crystal diamond

DOE PAGES

Hemawan, Kadek W.; Hemley, Russell J.

2015-08-03

Here, a key aspect of single crystal diamond growth via microwave plasma chemical vapor deposition is in-process control of the local plasma-substrate environment, that is, plasma gas phase concentrations of activated species at the plasma boundary layer near the substrate surface. Emission spectra of the plasma relative to the diamond substrate inside the microwave plasma reactor chamber have been analyzed via optical emission spectroscopy. The spectra of radical species such as CH, C 2, and H (Balmer series) important for diamond growth were found to be more depndent on operating pressure than on microwave power. Plasma gas temperatures were calculatedmore » from measurements of the C 2 Swan band (d 3Π → a 3Π transition) system. The plasma gas temperature ranges from 2800 to 3400 K depending on the spatial location of the plasma ball, microwave power and operating pressure. Addition of Ar into CH 4 + H 2 plasma input gas mixture has little influence on the Hα, Hβ, and Hγ intensities and single-crystal diamond growth rates.« less

An investigation of transient pressure and plasma properties in a pinched plasma column. M.S. Thesis

NASA Technical Reports Server (NTRS)

Stover, E. K.; York, T. M.

1971-01-01

The transient pinched plasma column generated in a linear Z-pinch was studied experimentally and analytically. The plasma column was investigated experimentally with the following plasma diagnostics: a special rapid response pressure transducer, a magnetic field probe, a voltage probe and discharge luminosity. Axial pressure profiles on the discharge chamber axis were used to identify three characteristic regions of plasma column behavior; they were in temporal sequence: strong axial pressure asymmetry noted early in plasma column lifetime followed by plasma heating in which there is a rapid rise in static pressure and a slight decrease static pressure before plasma column breakup. Plasma column lifetime was approximately 5 microseconds. The axial pressure asymmetry was attributed to nonsimultaneous pinching of the imploding current sheet along the discharge chamber axis. The rapid heating is attributed in part to viscous effects introduced by radial gradients in the axial streaming velocity. Turbulent heating arising from discharge current excitation of the ion acoustic wave instability is also considered a possible heating mechanism.

Modeling of low pressure plasma sources for microelectronics fabrication

NASA Astrophysics Data System (ADS)

Agarwal, Ankur; Bera, Kallol; Kenney, Jason; Likhanskii, Alexandre; Rauf, Shahid

2017-10-01

Chemically reactive plasmas operating in the 1 mTorr-10 Torr pressure range are widely used for thin film processing in the semiconductor industry. Plasma modeling has come to play an important role in the design of these plasma processing systems. A number of 3-dimensional (3D) fluid and hybrid plasma modeling examples are used to illustrate the role of computational investigations in design of plasma processing hardware for applications such as ion implantation, deposition, and etching. A model for a rectangular inductively coupled plasma (ICP) source is described, which is employed as an ion source for ion implantation. It is shown that gas pressure strongly influences ion flux uniformity, which is determined by the balance between the location of plasma production and diffusion. The effect of chamber dimensions on plasma uniformity in a rectangular capacitively coupled plasma (CCP) is examined using an electromagnetic plasma model. Due to high pressure and small gap in this system, plasma uniformity is found to be primarily determined by the electric field profile in the sheath/pre-sheath region. A 3D model is utilized to investigate the confinement properties of a mesh in a cylindrical CCP. Results highlight the role of hole topology and size on the formation of localized hot-spots. A 3D electromagnetic plasma model for a cylindrical ICP is used to study inductive versus capacitive power coupling and how placement of ground return wires influences it. Finally, a 3D hybrid plasma model for an electron beam generated magnetized plasma is used to understand the role of reactor geometry on plasma uniformity in the presence of E  ×  B drift.

A new linear plasma device for various edge plasma studies at SWIP

NASA Astrophysics Data System (ADS)

Xu, Min; Zheng, Pengfei; Tynan, George; Che, Tong; Wang, Zhanhui; Guo, Dong; Wei, Ran

2017-10-01

To facilitate the plasma-material interactions (PMI) studies, Southwestern Institute of Physics (SWIP) has constructed a linear plasma device. It is comprised of a source chamber (Φ 0.4 m), a target chamber (Φ 0.9 m), 15 magnets with different sizes, and power supplies with the total power of a few hundred kilowatts, etc. A maximum magnetic field of 0.3 Tesla along the axial direction can be produced. The current of each of the 15 magnets can be independently controlled. More than 60 ports are available for diagnostics, with the sizes vary from Φ 50 mm to Φ 150 mm. Rectangular ports of 190 mm × 270 mm are also available. 12 ports looking at the sample holder are specially designed for ion beam injection, of which the axes are 25 to the chamber axis. The device is equipped with a LaB6 hot cathode plasma source, which is able to generate steady-state H/D/He plasmas with a diameter of Φ 100 mm, density of 1x1019 /m3 , and a particle flux of 1022 1023 n/m2 .s. The electron temperature is usually a few eV. Further, a Helicon RF plasma source is also planned for plasma transport studies. Int'l Sci & Tech Cooperation Program of China (No. 2015DFA61760).

Plasma current collection of Z-93 thermal control paint as measured in the Lewis Research Center's plasma interaction facility

NASA Technical Reports Server (NTRS)

Hillard, G. Barry

1993-01-01

A sample of Z-93 thermal control paint was exposed to a simulated space environment in a plasma chamber. The sample was biased through a series of voltages ranging from -100 volts to +300 volts and electron and ion currents were measured. Currents were found to be in the micro-ampere range indicating that the material remains a reasonably good insulator under plasma conditions. As a second step, the sample was left in the chamber for six days and retested. Collected currents were reduced by from two to five times from the previous values indicating a substantial loss of conductivity. As a final test, the sample was removed, exposed to room conditions for two days, and returned to the chamber. Current measurements showed that the sample had partially recovered the lost conductivity. In addition to presenting these results, this report documents all of the experimental data as well as the statistical analyses performed.

Atmospheric-pressure plasma decontamination/sterilization chamber

DOEpatents

Herrmann, Hans W.; Selwyn, Gary S.

2001-01-01

An atmospheric-pressure plasma decontamination/sterilization chamber is described. The apparatus is useful for decontaminating sensitive equipment and materials, such as electronics, optics and national treasures, which have been contaminated with chemical and/or biological warfare agents, such as anthrax, mustard blistering agent, VX nerve gas, and the like. There is currently no acceptable procedure for decontaminating such equipment. The apparatus may also be used for sterilization in the medical and food industries. Items to be decontaminated or sterilized are supported inside the chamber. Reactive gases containing atomic and metastable oxygen species are generated by an atmospheric-pressure plasma discharge in a He/O.sub.2 mixture and directed into the region of these items resulting in chemical reaction between the reactive species and organic substances. This reaction typically kills and/or neutralizes the contamination without damaging most equipment and materials. The plasma gases are recirculated through a closed-loop system to minimize the loss of helium and the possibility of escape of aerosolized harmful substances.

Method and apparatus to produce high specific impulse and moderate thrust from a fusion-powered rocket engine

DOE Office of Scientific and Technical Information (OSTI.GOV)

Cohen, Samuel A.; Pajer, Gary A.; Paluszek, Michael A.

A system and method for producing and controlling high thrust and desirable specific impulse from a continuous fusion reaction is disclosed. The resultant relatively small rocket engine will have lower cost to develop, test, and operate that the prior art, allowing spacecraft missions throughout the planetary system and beyond. The rocket engine method and system includes a reactor chamber and a heating system for heating a stable plasma to produce fusion reactions in the stable plasma. Magnets produce a magnetic field that confines the stable plasma. A fuel injection system and a propellant injection system are included. The propellant injectionmore » system injects cold propellant into a gas box at one end of the reactor chamber, where the propellant is ionized into a plasma. The propellant and fusion products are directed out of the reactor chamber through a magnetic nozzle and are detached from the magnetic field lines producing thrust.« less

Process diagnostics and monitoring using the multipole resonance probe in an inhomogeneous plasma for ion-assisted deposition of optical coatings

NASA Astrophysics Data System (ADS)

Styrnoll, T.; Harhausen, J.; Lapke, M.; Storch, R.; Brinkmann, R. P.; Foest, R.; Ohl, A.; Awakowicz, P.

2013-08-01

The application of a multipole resonance probe (MRP) for diagnostic and monitoring purposes in a plasma ion-assisted deposition (PIAD) process is reported. Recently, the MRP was proposed as an economical and industry compatible plasma diagnostic device (Lapke et al 2011 Plasma Sources Sci. Technol. 20 042001). The major advantages of the MRP are its robustness against dielectric coating and its high sensitivity to measure the electron density. The PIAD process investigated is driven by the advanced plasma source (APS), which generates an ion beam in the deposition chamber for the production of high performance optical coatings. With a background neutral pressure of p0 ˜ 20 mPa the plasma expands from the source region into the recipient, leading to an inhomogeneous spatial distribution. Electron density and electron temperature vary over the distance from substrate (ne ˜ 109 cm-3 and Te,eff ˜ 2 eV) to the APS (ne ≳ 1012 cm-3 and Te,eff ˜ 20 eV) (Harhausen et al 2012 Plasma Sources Sci. Technol. 21 035012). This huge variation of the plasma parameters represents a big challenge for plasma diagnostics to operate precisely for all plasma conditions. The results obtained by the MRP are compared to those from a Langmuir probe chosen as reference diagnostics. It is demonstrated that the MRP is suited for the characterization of the PIAD plasma as well as for electron density monitoring. The latter aspect offers the possibility to develop new control schemes for complex industrial plasma environments.

Production of N[sup +] ions from a multicusp ion beam apparatus

DOEpatents

Kango Leung; Kunkel, W.B.; Walther, S.R.

1993-03-30

A method of generating a high purity (at least 98%) N[sup +] ion beam using a multicusp ion source having a chamber formed by a cylindrical chamber wall surrounded by a plurality of magnets, a filament centrally disposed in said chamber, a plasma electrode having an extraction orifice at one end of the chamber, a magnetic filter having two parallel magnets spaced from said plasma electrode and dividing the chamber into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber, maintaining the chamber wall at a positive voltage relative to the filament and at a magnitude for an optimum percentage of N[sup +] ions in the extracted ion beams, disposing a hot liner within the chamber and near the chamber wall to limit recombination of N[sup +] ions into the N[sub 2][sup +] ions, spacing the magnets of the magnetic filter from each other for optimum percentage of N[sup 3] ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8[times]10[sup [minus]4] torr) for an optimum percentage of N[sup +] ions in the extracted ion beam.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Rasouli, C.; Abbasi Davani, F.; Rokrok, B.

Plasma confinement using external magnetic field is one of the successful ways leading to the controlled nuclear fusion. Development and validation of the solution process for plasma equilibrium in the experimental toroidal fusion devices is the main subject of this work. Solution of the nonlinear 2D stationary problem as posed by the Grad-Shafranov equation gives quantitative information about plasma equilibrium inside the vacuum chamber of hot fusion devices. This study suggests solving plasma equilibrium equation which is essential in toroidal nuclear fusion devices, using a mesh-free method in a condition that the plasma boundary is unknown. The Grad-Shafranov equation hasmore » been solved numerically by the point interpolation collocation mesh-free method. Important features of this approach include truly mesh free, simple mathematical relationships between points and acceptable precision in comparison with the parametric results. The calculation process has been done by using the regular and irregular nodal distribution and support domains with different points. The relative error between numerical and analytical solution is discussed for several test examples such as small size Damavand tokamak, ITER-like equilibrium, NSTX-like equilibrium, and typical Spheromak.« less

Laboratory Studies on the Charging of Dust Grains in a Plasma

NASA Astrophysics Data System (ADS)

Xu, Wenjun

1993-01-01

The charging of dust grains by the surrounding plasma is studied in a dusty plasma device (DPD) (Xu, W., B. Song, R. L. Merlino, and N. D'Angelo, Rev. Sci. Instrum., 63, 5266, 1992). The dusty plasma device consists of a rotating-drum dust dispersal device used in conjunction with an existing Q-machine, to produce extended, steady state, magnetized plasma columns. The dust density in the dust chamber is controlled by the drum rotation speed. The device is capable of generating a dusty plasma in which as much as about 90% of the negative charge is attached to the dust grains of 1-10mu m size. Measurements of the dust parameter eta, the percentage of negative charge on free electrons in the dusty plasma, are presented. The dust parameter eta is found to depend on the rotational speed of the dust chamber, plasma density and the type and size of different dust. The dust parameter eta is calculated from a pair of Langmuir curves taken with and without dust under the same conditions. The operation of the dust chamber as described above has been confirmed by the agreement between the measurements of eta and the direct mechanical measurements consisting of weighing dust samples collected within the rotation dust chamber, at different rotation rates. By varying the ratio d/lambda_ {rm D} between the intergrain distance and the plasma Debye length, the effects predicted by Goertz and Ip (Goertz, C. K., and W-H. Ip, Geophys. Res. Lett., 11, 349, 1984), and subsequently reanalyzed in a more general fashion by Whipple et al. (Whipple, E. C., T. G. Northrop, and D. A. Mendis, J. Geophys. Rev., 90, 7405, 1985), as "isolated" dust grains become "closely packed" grains, have been demonstrated experimentally (Xu, W., N. D'Angelo, and R. L. Merlino, J. Geophys. Rev., 98, 7843, 1993). Similar results are presented and compared for two types of dust, kaolin and Al_2O _3, which have been studied in the experiment.

Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensor

NASA Astrophysics Data System (ADS)

Choo, Sung Joong; Lee, Byung-Chul; Lee, Sang-Myung; Park, Jung Ho; Shin, Hyun-Joon

2009-09-01

In this paper, silicon oxynitride layers deposited with different plasma-enhanced chemical vapor deposition (PECVD) conditions were fabricated and optimized, in order to make an interferometric sensor for detecting biochemical reactions. For the optimization of PECVD silicon oxynitride layers, the influence of the N2O/SiH4 gas flow ratio was investigated. RF power in the PEVCD process was also adjusted under the optimized N2O/SiH4 gas flow ratio. The optimized silicon oxynitride layer was deposited with 15 W in chamber under 25/150 sccm of N2O/SiH4 gas flow rates. The clad layer was deposited with 20 W in chamber under 400/150 sccm of N2O/SiH4 gas flow condition. An integrated Mach-Zehnder interferometric biosensor based on optical waveguide technology was fabricated under the optimized PECVD conditions. The adsorption reaction between bovine serum albumin (BSA) and the silicon oxynitride surface was performed and verified with this device.

Particulate filtration from emissions of a plasma pyrolysis assembly reactor using regenerable porous metal filters

NASA Technical Reports Server (NTRS)

Berger, Gordon M.; Agui, Juan H.; Vijayakumar, R.; Abney, Morgan B.; Greenwood, Zachary W.; West, Philip J.; Mitchell, Karen O.

2017-01-01

Microwave-based plasma pyrolysis technology is being studied as a means of supporting oxygen recovery in future spacecraft life support systems. The process involves the conversion of methane produced from a Sabatier reactor to acetylene and hydrogen, with a small amount of solid carbon particulates generated as a side product. The particles must be filtered before the acetylene is removed and the hydrogen-rich gas stream is recycled back to the CRA. We discuss developmental work on porous metal media filters for removing the carbon particulate emissions from the PPA exit gas stream and to provide in situ media regeneration capability. Because of the high temperatures involved in oxidizing the deposited carbon during regeneration, there was particular focus in this development on the materials that could be used, the housing design, and heating methods. This paper describes the design and operation of the filter and characterizes their performance from integrated testing at the Environmental Chamber (E-Chamber) at MSFC.

Particulate Filtration from Emissions of a Plasma Pyrolysis Assembly Reactor Using Regenerable Porous Metal Filters

NASA Technical Reports Server (NTRS)

Agui, Juan H.; Abney, Morgan; Greenwood, Zachary; West, Philip; Mitchell, Karen; Vijayakumar, R.; Berger, Gordon M.

2017-01-01

Microwave-based plasma pyrolysis technology is being studied as a means of supporting oxygen recovery in future spacecraft life support systems. The process involves the conversion of methane produced from a Sabatier reactor to acetylene and hydrogen, with a small amount of solid carbon particulates generated as a side product. The particles must be filtered before the acetylene is removed and the hydrogen-rich gas stream is recycled back to the CRA. We discuss developmental work on porous metal media filters for removing the carbon particulate emissions from the PPA exit gas stream and to provide in situ media regeneration capability. Because of the high temperatures involved in oxidizing the deposited carbon during regeneration, there was particular focus in this development on the materials that could be used, the housing design, and heating methods. This paper describes the design and operation of the filter and characterizes their performance from integrated testing at the Environmental Chamber (E-Chamber) at MSFC.

Comparative analysis of polychlorinated biphenyl decomposition processes in air or argon (+oxygen) thermal plasma.

PubMed

Kostic, Z G; Stefanovic, P L; Pavlović, P B

2000-07-10

Thermal plasmas may solve one of the biggest toxic waste disposal problems. The disposal of polychlorinated biphenyls (PCBs) is a long standing problem which will get worse in the coming years, when 180000 tons of PCB-containing wastes are expected to accumulate in Europe (Hot ions break down toxic chemicals, New Scientist, 16 April 1987, p. 24.). The combustion of PCBs in ordinary incinerators (at temperature T approximately 1100 K, as measured near the inner wall of the combustion chamber (European Parliament and Council Directive on Incineration of Waste (COM/99/330), Europe energy, 543, Sept. 17, 1999, 1-23.)) can cause more problems than it solves, because highly toxic dioxins and dibenzofurans are formed if the combustion temperature is too low (T<1400 K). The paper presents a thermodynamic consideration and comparative analysis of PCB decomposition processes in air or argon (+oxygen) thermal plasmas.

Investigation of Sterilization Mechanism for Geobacillus stearothermophilus Spores with Plasma-Excited Neutral Gas

NASA Astrophysics Data System (ADS)

Matsui, Kei; Ikenaga, Noriaki; Sakudo, Noriyuki

2015-09-01

We investigate the mechanism of the sterilization with plasma-excited neutral gas that uniformly sterilizes both the space and inner wall of the reactor chamber at atmospheric pressure. Only reactive neutral species such as plasma-excited gas molecules and radicals are separated from the plasma and sent to the reactor chamber for chemical sterilization. The plasma source gas uses humidified mixture of nitrogen and oxygen. Geobacillus stearothermophilus spores and tyrosine which is amino acid are treated by the plasma-excited neutral gas. Shape change of the treated spore is observed by SEM, and chemical modification of the treated tyrosine is analyzed by HPLC. As a result, the surface of the treated spore shows depression. Hydroxylation and nitration of tyrosine are shown after the treatment. For these reasons, we believe that the sterilization with plasma-excited neutral gas results from the deformation of spore structure due to the chemical modification of amino acid.

Segmented saddle-shaped passive stabilization conductors for toroidal plasmas

DOEpatents

Leuer, James A.

1990-05-01

A large toroidal vacuum chamber for plasma generation and confinement is lined with a toroidal blanket for shielding using modules segmented in the toroidal direction. To provide passive stabilization in the same manner as a conductive vacuum chamber wall, saddle-shaped conductor loops are provided on blanket modules centered on a midplane of the toroidal chamber with horizontal conductive bars above and below the midplane, and vertical conductive legs on opposite sides of each module to provide return current paths between the upper and lower horizontal conductive bars. The close proximity of the vertical legs provided on adjacent modules without making physical contact cancel the electromagnetic field of adjacent vertical legs. The conductive bars spaced equally above and below the midplane simulate toroidal conductive loops or hoops that are continuous, for vertical stabilization of the plasma even though they are actually segmented.

Neutron tubes

DOEpatents

Leung, Ka-Ngo [Hercules, CA; Lou, Tak Pui [Berkeley, CA; Reijonen, Jani [Oakland, CA

2008-03-11

A neutron tube or generator is based on a RF driven plasma ion source having a quartz or other chamber surrounded by an external RF antenna. A deuterium or mixed deuterium/tritium (or even just a tritium) plasma is generated in the chamber and D or D/T (or T) ions are extracted from the plasma. A neutron generating target is positioned so that the ion beam is incident thereon and loads the target. Incident ions cause D-D or D-T (or T-T) reactions which generate neutrons. Various embodiments differ primarily in size of the chamber and position and shape of the neutron generating target. Some neutron generators are small enough for implantation in the body. The target may be at the end of a catheter-like drift tube. The target may have a tapered or conical surface to increase target surface area.

21 CFR 864.9575 - Environmental chamber for storage of platelet concentrate.

Code of Federal Regulations, 2012 CFR

2012-04-01

... to hold platelet-rich plasma within a preselected temperature range. (b) Classification. Class II... 21 Food and Drugs 8 2012-04-01 2012-04-01 false Environmental chamber for storage of platelet... Establishments That Manufacture Blood and Blood Products § 864.9575 Environmental chamber for storage of platelet...

21 CFR 864.9575 - Environmental chamber for storage of platelet concentrate.

Code of Federal Regulations, 2010 CFR

2010-04-01

... to hold platelet-rich plasma within a preselected temperature range. (b) Classification. Class II... 21 Food and Drugs 8 2010-04-01 2010-04-01 false Environmental chamber for storage of platelet... Establishments That Manufacture Blood and Blood Products § 864.9575 Environmental chamber for storage of platelet...

21 CFR 864.9575 - Environmental chamber for storage of platelet concentrate.

Code of Federal Regulations, 2013 CFR

2013-04-01

... to hold platelet-rich plasma within a preselected temperature range. (b) Classification. Class II... 21 Food and Drugs 8 2013-04-01 2013-04-01 false Environmental chamber for storage of platelet... Establishments That Manufacture Blood and Blood Products § 864.9575 Environmental chamber for storage of platelet...

21 CFR 864.9575 - Environmental chamber for storage of platelet concentrate.

Code of Federal Regulations, 2011 CFR

2011-04-01

... to hold platelet-rich plasma within a preselected temperature range. (b) Classification. Class II... 21 Food and Drugs 8 2011-04-01 2011-04-01 false Environmental chamber for storage of platelet... Establishments That Manufacture Blood and Blood Products § 864.9575 Environmental chamber for storage of platelet...

21 CFR 864.9575 - Environmental chamber for storage of platelet concentrate.

Code of Federal Regulations, 2014 CFR

2014-04-01

... to hold platelet-rich plasma within a preselected temperature range. (b) Classification. Class II... 21 Food and Drugs 8 2014-04-01 2014-04-01 false Environmental chamber for storage of platelet... Establishments That Manufacture Blood and Blood Products § 864.9575 Environmental chamber for storage of platelet...

A Plasma Window for Transmission of Radiation and Particle Beams from Vacuum to Atmosphere for Various Applications

NASA Astrophysics Data System (ADS)

Hershcovitch, Ady

1997-11-01

Many industrial and scientific processes like electron beam melting and welding, material modification by ion implantation, dry etching, and micro-fabrication, as well as generation of synchrotron radiation are performed almost exclusively in vacuum nowadays, since the electron and ion guns and their extractors must be kept at a reasonably high vacuum. Consequently, there are numerous drawbacks, among which are low production rates due to required pumping time, limits the vacuum volume sets on the size of target objects. In a small number of applications like non-vacuum electron beam welding, and various processes involving UV and x-ray radiation, thin vacuum walls or long stages of differential pumping are used. But, the resultant degradations of particle and radiation beams severely limit those applications. A novel apparatus, which utilized a short plasma arc, was successfully used to maintain a pressure of 7.6 x exp(-6) Torr in a vacuum chamber with a 2.36mm aperture to atmosphere, i.e., a plasma was successfully used to "plug" a hole to atmosphere while maintaining a reasonably high vacuum in the chamber. Successful transmission of charged particle beams from a vacuum through the plasma to atmosphere was accomplished. More details can be found in A. Hershcovitch, J. Appl. Physics 78, p. 5283 (1995). In addition to sustaining a vacuum atmosphere interface, the plasma has very strong lensing effect on charged particles. The plasma current generates an azimuthal magnetic field which exerts a radial Lorentz on charged particles moving parallel to the current channel. With proper orientation of the current direction, the Lorentz force is radially inward. This feature can be used to focus in beams to a very small spot size, and to overcome beam dispersion due to scattering by atmospheric atoms and molecules. Relatively hot plasma at the atmosphere boundary rarefies the atmospheric gases to further enhance particle beam propagation to the materials to target. Recent experimental results, with a plasma window coupled to a venturi, show a factor of three further enhancement in vacuum-atmosphere separation.

Ion extraction from a plasma

NASA Technical Reports Server (NTRS)

Aston, G.; Wilbur, P. J.

1981-01-01

The physical processes governing ion extraction from a plasma have been examined experimentally. The screen hole plasma sheath (the transition region wherein significant ion acceleration and complete electron retardation occurs) has been defined by equipotential plots for a variety of ion accelerator system geometries and operating conditions. It was found that the screen hole plasma sheath extends over a large distance, and influences ion and electron trajectories at least 15 Debye lengths within the discharge chamber. The electron density variation within the screen hole plasma sheath satisfied a Maxwell-Boltzmann density distribution at an effective electron temperature dependent on the discharge plasma primary-to-Maxwellian electron density ratio. Plasma ion flow up to and through the sheath was predominantly one-dimensional, and the ions entered the sheath region with a modified Bohm velocity. Low values of the screen grid thickness to screen hole diameter ratio were found to give good ion focusing and high extracted ion currents because of the effect of screen webbing on ion focusing.

Effect of axial magnetic field on a 2.45 GHz permanent magnet ECR ion source.

PubMed

Nakamura, T; Wada, H; Asaji, T; Furuse, M

2016-02-01

Herein, we conduct a fundamental study to improve the generation efficiency of a multi-charged ion source using argon. A magnetic field of our electron cyclotron resonance ion source is composed of a permanent magnet and a solenoid coil. Thereby, the axial magnetic field in the chamber can be tuned. Using the solenoid coil, we varied the magnetic field strength in the plasma chamber and measured the ion beam current extracted at the electrode. We observed an approximately three times increase in the Ar(4+) ion beam current when the magnetic field on the extractor-electrode side of the chamber was weakened. From our results, we can confirm that the multi-charged ion beam current changes depending on magnetic field intensity in the plasma chamber.

Thermal synthesis apparatus

DOEpatents

Fincke, James R [Idaho Falls, ID; Detering, Brent A [Idaho Falls, ID

2009-08-18

An apparatus for thermal conversion of one or more reactants to desired end products includes an insulated reactor chamber having a high temperature heater such as a plasma torch at its inlet end and, optionally, a restrictive convergent-divergent nozzle at its outlet end. In a thermal conversion method, reactants are injected upstream from the reactor chamber and thoroughly mixed with the plasma stream before entering the reactor chamber. The reactor chamber has a reaction zone that is maintained at a substantially uniform temperature. The resulting heated gaseous stream is then rapidly cooled by passage through the nozzle, which "freezes" the desired end product(s) in the heated equilibrium reaction stage, or is discharged through an outlet pipe without the convergent-divergent nozzle. The desired end products are then separated from the gaseous stream.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Anand, Venu, E-mail: venuanand@cense.iisc.ernet.in, E-mail: venuanand83@gmail.com; Shivashankar, S. A.; Nair, Aswathi R.

Gas discharge plasmas used for thinfilm deposition by plasma-enhanced chemical vapor deposition (PECVD) must be devoid of contaminants, like dust or active species which disturb the intended chemical reaction. In atmospheric pressure plasma systems employing an inert gas, the main source of such contamination is the residual air inside the system. To enable the construction of an atmospheric pressure plasma (APP) system with minimal contamination, we have carried out fluid dynamic simulation of the APP chamber into which an inert gas is injected at different mass flow rates. On the basis of the simulation results, we have designed and builtmore » a simple, scaled APP system, which is capable of holding a 100 mm substrate wafer, so that the presence of air (contamination) in the APP chamber is minimized with as low a flow rate of argon as possible. This is examined systematically by examining optical emission from the plasma as a function of inert gas flow rate. It is found that optical emission from the plasma shows the presence of atmospheric air, if the inlet argon flow rate is lowered below 300 sccm. That there is minimal contamination of the APP reactor built here, was verified by conducting an atmospheric pressure PECVD process under acetylene flow, combined with argon flow at 100 sccm and 500 sccm. The deposition of a polymer coating is confirmed by infrared spectroscopy. X-ray photoelectron spectroscopy shows that the polymer coating contains only 5% of oxygen, which is comparable to the oxygen content in polymer deposits obtained in low-pressure PECVD systems.« less

Combustion flame-plasma hybrid reactor systems, and chemical reactant sources

DOEpatents

Kong, Peter C

2013-11-26

Combustion flame-plasma hybrid reactor systems, chemical reactant sources, and related methods are disclosed. In one embodiment, a combustion flame-plasma hybrid reactor system comprising a reaction chamber, a combustion torch positioned to direct a flame into the reaction chamber, and one or more reactant feed assemblies configured to electrically energize at least one electrically conductive solid reactant structure to form a plasma and feed each electrically conductive solid reactant structure into the plasma to form at least one product is disclosed. In an additional embodiment, a chemical reactant source for a combustion flame-plasma hybrid reactor comprising an elongated electrically conductive reactant structure consisting essentially of at least one chemical reactant is disclosed. In further embodiments, methods of forming a chemical reactant source and methods of chemically converting at least one reactant into at least one product are disclosed.

Experimental investigation of vapor shielding effects induced by ELM-like pulsed plasma loads using the double plasma gun device

NASA Astrophysics Data System (ADS)

Sakuma, I.; Kikuchi, Y.; Kitagawa, Y.; Asai, Y.; Onishi, K.; Fukumoto, N.; Nagata, M.

2015-08-01

We have developed a unique experimental device of so-called double plasma gun, which consists of two magnetized coaxial plasma gun (MCPG) devices, in order to clarify effects of vapor shielding on material erosion due to transient events in magnetically confined fusion devices. Two ELM-like pulsed plasmas produced by the two MCPG devices were injected into a target chamber with a variable time difference. For generating ablated plasmas in front of a target material, an aluminum foil sample in the target chamber was exposed to a pulsed plasma produced by the 1st MCPG device. The 2nd pulsed plasma was produced with a time delay of 70 μs. It was found that a surface absorbed energy measured by a calorimeter was reduced to ∼66% of that without the Al foil sample. Thus, the reduction of the incoming plasma energy by the vapor shielding effect was successfully demonstrated in the present experiment.

Electromagnetic Safety of Spacecraft During Active Experiments with the Use of Plasma Accelerators and Ion Injectors

NASA Astrophysics Data System (ADS)

Plokhikh, Andrey; Popov, Garri; Shishkin, Gennady; Antropov, Nikolay; Vazhenin, Nikolay; Soganova, Galina

Works under the development and application of stationary and pulsed plasma accelerators of charged particles conducted at the Moscow Aviation Institute and Research Institute of Applied Mechanics and Electrodynamics during over 40 years, active experiments on board meteorological rockets, artificial Earth satellites and "Mir" orbital station including [1], allowed to obtain data on the influence of pulsed and continuous plasma injection with the given parameters on the drop of energetic particles out of the radiation belts, efficiency of artificial excitation and propagation of electromagnetic waves in ELF and VLF ranges, and evolution of artificial plasma formations in different regions of ionosphere. Variation of the near-spacecraft electromagnetic environment related to the operation of plasma injectors was registered during active experiments along with the global electrodynamic processes. The measured electromagnetic fields are of rather high intensity and occupy frequency spectrum from some Hz to tens of GHz that may be of definite danger for the operation of spacecraft and its onboard systems. Analysis for the known test data is presented in the paper and methods are discussed for the diagnostics and modeling under laboratory conditions of radiative processes proceeding at the operation of plasma accelerators and ion injectors used while making active space experiments. Great attention is paid to the methodological and metrological bases for making radio measurements in vacuum chambers, design concept and hardware configuration of ground special-purpose instrumentation scientific complexes [2]. Basic requirements are formulated for the measurements and analysis of electromagnetic fields originating during the operation of plasma accelerators, including the radiative induced and conductive components inside the spacecraft, as well as the wave emission and excitation outside the spacecraft, in the ionosphere including. Measurement results for the intrinsic electromagnetic emission of stationary and pulsed plasma injectors and of the electric propulsions developed on their basis are discussed. Predictive estimates are presented for the influence of originating electromagnetic fields and emissions on the electromagnetic safety of spacecraft and its systems and for the reliability of communication with ground command and tracking stations, and recommendations are given on the reduction of destructive effects. 1. S. Avdyushin, I. Podgorny, G. Popov, A. Porotnikov, "Plasma Accelerator Use for Studying Physical Processes in Space." Plasma Accelerators and Ion Injectors, Nauka, 1984. 2. A. Plokhikh, "Peculiarities of Radio Measurements in the Metal Vacuum Chambers." Vestnik moskovskogo aviatsionnogo instituta. v. 11, No. 2, 2004, pp. 66-78.

DBD Plasma Actuators for Flow Control in Air Vehicles and Jet Engines - Simulation of Flight Conditions in Test Chambers by Density Matching

NASA Technical Reports Server (NTRS)

Ashpis, David E.; Thurman, Douglas R.

2011-01-01

Dielectric Barrier Discharge (DBD) Plasma actuators for active flow control in aircraft and jet engines need to be tested in the laboratory to characterize their performance at flight operating conditions. DBD plasma actuators generate a wall-jet electronically by creating weakly ionized plasma, therefore their performance is affected by gas discharge properties, which, in turn, depend on the pressure and temperature at the actuator placement location. Characterization of actuators is initially performed in a laboratory chamber without external flow. The pressure and temperature at the actuator flight operation conditions need to be simultaneously set in the chamber. A simplified approach is desired. It is assumed that the plasma discharge depends only on the gas density, while other temperature effects are assumed to be negligible. Therefore, tests can be performed at room temperature with chamber pressure set to yield the same density as in operating flight conditions. The needed chamber pressures are shown for altitude flight of an air vehicle and for jet engines at sea-level takeoff and altitude cruise conditions. Atmospheric flight conditions are calculated from standard atmosphere with and without shock waves. The engine data was obtained from four generic engine models; 300-, 150-, and 50-passenger (PAX) aircraft engines, and a military jet-fighter engine. The static and total pressure, temperature, and density distributions along the engine were calculated for sea-level takeoff and for altitude cruise conditions. The corresponding chamber pressures needed to test the actuators were calculated. The results show that, to simulate engine component flows at in-flight conditions, plasma actuator should be tested over a wide range of pressures. For the four model engines the range is from 12.4 to 0.03 atm, depending on the placement of the actuator in the engine. For example, if a DBD plasma actuator is to be placed at the compressor exit of a 300 PAX engine, it has to be tested at 12.4 atm for takeoff, and 6 atm for cruise conditions. If it is to be placed at the low-pressure turbine, it has to be tested at 0.5 and 0.2 atm, respectively. These results have implications for the feasibility and design of DBD plasma actuators for jet engine flow control applications. In addition, the distributions of unit Reynolds number, Mach number, and velocity along the engine are provided. The engine models are non-proprietary and this information can be used for evaluation of other types of actuators and for other purposes.

Ion thruster performance model

NASA Technical Reports Server (NTRS)

Brophy, J. R.

1984-01-01

A model of ion thruster performance is developed for high flux density, cusped magnetic field thruster designs. This model is formulated in terms of the average energy required to produce an ion in the discharge chamber plasma and the fraction of these ions that are extracted to form the beam. The direct loss of high energy (primary) electrons from the plasma to the anode is shown to have a major effect on thruster performance. The model provides simple algebraic equations enabling one to calculate the beam ion energy cost, the average discharge chamber plasma ion energy cost, the primary electron density, the primary-to-Maxwellian electron density ratio and the Maxwellian electron temperature. Experiments indicate that the model correctly predicts the variation in plasma ion energy cost for changes in propellant gas (Ar, Kr and Xe), grid transparency to neutral atoms, beam extraction area, discharge voltage, and discharge chamber wall temperature. The model and experiments indicate that thruster performance may be described in terms of only four thruster configuration dependent parameters and two operating parameters. The model also suggests that improved performance should be exhibited by thruster designs which extract a large fraction of the ions produced in the discharge chamber, which have good primary electron and neutral atom containment and which operate at high propellant flow rates.

Role of ion magnetization in formation of radial density profile in magnetically expanding plasma produced by helicon antenna

NASA Astrophysics Data System (ADS)

Yadav, Sonu; Ghosh, Soumen; Bose, Sayak; Barada, Kshitish K.; Pal, Rabindranath; Chattopadhyay, Prabal K.

2018-04-01

Experimentally, the density profile in the magnetic nozzle of a helicon antenna based plasma device is seen to be modified from being centrally peaked to that of hollow nature as the external magnetic field is increased. It occurs above a characteristic field value when the ions become magnetized in the expansion chamber. The density profile in the source chamber behind the nozzle, however, remains peaked on-axis irrespective of the magnetic field. The electron temperature there is observed to be hollow and this nature is carried to the expansion chamber along the field line. In the electron energy distribution near the off axis peak location, a high energy tail exists. Rotation of these tail electrons in the azimuthal direction due to the gradient-B drift in the expansion chamber leads to an additional off-axis ionization and forms the hollow density profile. It seems that if the ions are not magnetized, then the off-axially produced additional plasma is not confined and the density profile retains the on-axis peak nature. The present experiment successfully demonstrates how the knowledge of the ion magnetization together with tail electrons significantly contributes to the design of an efficient helicon plasma based thruster.

Development and evaluation of magnesium oxide-based ceramics for chamber parts in mass-production plasma etching equipment

NASA Astrophysics Data System (ADS)

Kasashima, Yuji; Tsutsumi, Kota; Mitomi, Shinzo; Uesugi, Fumihiko

2017-06-01

In mass-production plasma etching equipment, the corrosion of ceramic chamber parts reduces the production yield of LSI and overall equipment effectiveness (OEE) owing to contamination, short useful life, and particle generation. Novel ceramics that can improve the production yield and OEE are highly required. We develop magnesium oxide (MgO)-based ceramics and evaluate them under mass-production plasma etching conditions. The results of this study indicate that the developed MgO-based ceramics with high mechanical properties and low electric resistivity have a higher resistance to corrosion in plasma etching using CF4 gas than Si and conventional ceramic materials such as aluminum oxide and yttrium oxide.

Optimization and testing of solid thin film lubrication deposition processes

NASA Astrophysics Data System (ADS)

Danyluk, Michael J.

A novel method for testing solid thin films in rolling contact fatigue (RCF) under ultra-high vacuum (UHV) and high rotational speeds (130 Hz) is presented in this thesis. The UHV-RCF platform is used to quantify the adhesion and lubrication aspects of two thin film coatings deposited on ball-bearings using a physical vapor deposition ion plating process. Plasma properties during ion plating were measured using a Langmuir probe and there is a connection between ion flux, film stress, film adhesion, process voltage, pressure, and RCF life. The UHV-RCF platform and vacuum chamber were constructed using off-the-shelf components and 88 RCF tests in high vacuum have been completed. Maximum RCF life was achieved by maintaining an ion flux between 10 13 to 1015 (cm-2 s-1) with a process voltage and pressure near 1.5 kV and 15 mTorr. Two controller schemes were investigated to maintain optimal plasma conditions for maximum RCF life: PID and LQR. Pressure disturbances to the plasma have a detrimental effect on RCF life. Control algorithms that mitigate pressure and voltage disturbances already exist. However, feedback from the plasma to detect disturbances has not been explored related to deposition processes in the thin-film science literature. Manometer based pressure monitoring systems have a 1 to 2 second delay time and are too slow to detect common pressure bursts during the deposition process. Plasma diagnostic feedback is much faster, of the order of 0.1 second. Plasma total-current feedback was used successfully to detect a typical pressure disturbance associated with the ion plating process. Plasma current is related to ion density and process pressure. A real-time control application was used to detect the pressure disturbance by monitoring plasma-total current and converting it to feedback-input to a pressure control system. Pressure overshoot was eliminated using a nominal PID controller with feedback from a plasma-current diagnostic measurement tool.

A table top experiment to study plasma confined by a dipole magnet

NASA Astrophysics Data System (ADS)

Bhattacharjee, Sudeep; Baitha, Anuj Ram

2016-10-01

There has been a long quest to understand charged particle generation, confinement and underlying complex processes in a plasma confined by a dipole magnet. Our earth's magnetosphere is an example of such a naturally occurring system. A few laboratory experiments have been designed for such investigations, such as the Levitated Dipole Experiment (LDX) at MIT, the Terella experiment at Columbia university, and the Ring Trap-1 (RT-1) experiment at the University of Tokyo. However, these are large scale experiments, where the dipole magnetic field is created with superconducting coils, thereby, necessitating power supplies and stringent cryogenic requirements. We report a table top experiment to investigate important physical processes in a dipole plasma. A strong cylindrical permanent magnet, is employed to create the dipole field inside a vacuum chamber. The magnet is suspended and cooled by circulating chilled water. The plasma is heated by electromagnetic waves of 2.45 GHz and a second frequency in the range 6 - 11 GHz. Some of the initial results of measurements and numerical simulation of magnetic field, visual observations of the first plasma, and spatial measurements of plasma parameters will be presented.

The influence of ambipolarity on plasma confinement and on the performance of electron cyclotron resonance ion sources.

PubMed

Schachter, L; Dobrescu, S; Stiebing, K E; Thuillier, T; Lamy, T

2008-02-01

Charge diffusion in an electron cyclotron resonance ion source (ECRIS) discharge is usually characterized by nonambipolar behavior. While the ions are transported to the radial walls, electrons are lost axially from the magnetic trap. Global neutrality is maintained via compensating currents in the conducting walls of the vacuum chamber. It is assumed that this behavior reduces the ion breeding times compared to a truly ambipolar plasma. We have carried out a series of dedicated experiments in which the ambipolarity of the ECRIS plasma was influenced by inserting special metal-dielectric structures (MD layers) into the plasma chamber of the Frankfurt 14 GHz ECRIS. The measurements demonstrate the positive influence on the source performance when the ECR plasma is changed toward more ambipolar behavior.

Investigation and control of the {{\\rm{O}}}_{3}- to {NO}-transition in a novel sub-atmospheric pressure dielectric barrier discharge

NASA Astrophysics Data System (ADS)

Bansemer, Robert; Schmidt-Bleker, Ansgar; van Rienen, Ursula; Weltmann, Klaus-Dieter

2017-06-01

A novel flow-driven dielectric barrier discharge concept is presented, which uses a Venturi pump to transfer plasma-generated reactive oxygen and nitrogen species from a sub-atmospheric pressure (200{--}600 {mbar}) discharge region to ambient pressure and can be operated with air. By adjusting the working pressure of the device, the plasma chemistry can be tuned continuously from an ozone ({{{O}}}3)-dominated mode to a nitrogen oxides ({{NO}}x)-only mode. The plasma source is characterized focusing on the mechanisms effecting this mode change. The composition of the device’s output gas was determined using Fourier-transform infrared spectroscopy. The results are correlated to measurements of discharge chamber pressure and temperature as well as of input power. It is found that the mode-change temperature can be controlled by the discharge chamber pressure. The source concept is capable of generating an {{NO}}x-dominated plasma chemistry at gas temperatures distinctly below 400 {{K}}. Through mixing of the processed gas stream with a second flow of pressurized air required for the operation of the Venturi pump, the resulting product gas stream remains close to room temperature. A reduced zero-dimensional reaction kinetics model with only seven reactions is capable of describing the observed pressure- and temperature-dependence of the {{{O}}}3 to {{NO}}x mode-change.

Electron density measurements for plasma adaptive optics

NASA Astrophysics Data System (ADS)

Neiswander, Brian W.

Over the past 40 years, there has been growing interest in both laser communications and directed energy weapons that operate from moving aircraft. As a laser beam propagates from an aircraft in flight, it passes through boundary layers, turbulence, and shear layers in the near-region of the aircraft. These fluid instabilities cause strong density gradients which adversely affect the transmission of laser energy to a target. Adaptive optics provides corrective measures for this problem but current technology cannot respond quickly enough to be useful for high speed flight conditions. This research investigated the use of plasma as a medium for adaptive optics for aero-optics applications. When a laser beam passes through plasma, its phase is shifted proportionally to the electron density and gas heating within the plasma. As a result, plasma can be utilized as a dynamically controllable optical medium. Experiments were carried out using a cylindrical dielectric barrier discharge plasma chamber which generated a sub-atmospheric pressure, low-temperature plasma. An electrostatic model of this design was developed and revealed an important design constraint relating to the geometry of the chamber. Optical diagnostic techniques were used to characterize the plasma discharge. Single-wavelength interferometric experiments were performed and demonstrated up to 1.5 microns of optical path difference (OPD) in a 633 nm laser beam. Dual-wavelength interferometry was used to obtain time-resolved profiles of the plasma electron density and gas heating inside the plasma chamber. Furthermore, a new multi-wavelength infrared diagnostic technique was developed and proof-of-concept simulations were conducted to demonstrate the system's capabilities.

Plasma property and performance prediction for mercury ion thrusters

NASA Technical Reports Server (NTRS)

Longhurst, G. R.; Wilbur, P. J.

1979-01-01

The discharge chambers of mercury ion thrusters are modelled so the principal effects and processes which govern discharge plasma properties and thruster performance are described. The conservation relations for mass, charge and energy when applied to the Maxwellian electron population in the ion production region yield equations which may be made one-dimensional by the proper choice of coordinates. Solutions to these equations with the appropriate boundary conditions give electron density and temperature profiles which agree reasonably well with measurements. It is then possible to estimate plasma properties from thruster design data and those operating parameters which are directly controllable. By varying the operating parameter inputs to the computer code written to solve these equations, perfromance curves are obtained which agree quite well with measurements.

Delta-Doping at Wafer Level for High Throughput, High Yield Fabrication of Silicon Imaging Arrays

NASA Technical Reports Server (NTRS)

Hoenk, Michael E. (Inventor); Nikzad, Shoulch (Inventor); Jones, Todd J. (Inventor); Greer, Frank (Inventor); Carver, Alexander G. (Inventor)

2014-01-01

Systems and methods for producing high quantum efficiency silicon devices. A silicon MBE has a preparation chamber that provides for cleaning silicon surfaces using an oxygen plasma to remove impurities and a gaseous (dry) NH3 + NF3 room temperature oxide removal process that leaves the silicon surface hydrogen terminated. Silicon wafers up to 8 inches in diameter have devices that can be fabricated using the cleaning procedures and MBE processing, including delta doping.

Laser ignition of an experimental combustion chamber with a multi-injector configuration at low pressure conditions

NASA Astrophysics Data System (ADS)

Börner, Michael; Manfletti, Chiara; Kroupa, Gerhard; Oschwald, Michael

2017-09-01

In search of reliable and light-weight ignition systems for re-ignitable upper stage engines, a laser ignition system was adapted and tested on an experimental combustion chamber for propellant injection into low combustion chamber pressures at 50-80 mbar. The injector head pattern consisted of five coaxial injector elements. Both, laser-ablation-driven ignition and laser-plasma-driven ignition were tested for the propellant combination liquid oxygen and gaseous hydrogen. The 122 test runs demonstrated the reliability of the ignition system for different ignition configurations and negligible degradation due to testing. For the laser-plasma-driven scheme, minimum laser pulse energies needed for 100% ignition probability were found to decrease when increasing the distance of the ignition location from the injector faceplate with a minimum of 2.6 mJ. For laser-ablation-driven ignition, the minimum pulse energy was found to be independent of the ablation material tested and was about 1.7 mJ. The ignition process was characterized using both high-speed Schlieren and OH* emission diagnostics. Based on these findings and on the increased fiber-based pulse transport capabilities recently published, new ignition system configurations for space propulsion systems relying on fiber-based pulse delivery are formulated. If the laser ignition system delivers enough pulse energy, the laser-plasma-driven configuration represents the more versatile configuration. If the laser ignition pulse power is limited, the application of laser-ablation-driven ignition is an option to realize ignition, but implies restrictions concerning the location of ignition.

Apparatus and method to enhance X-ray production in laser produced plasmas

DOEpatents

Augustoni, A.L.; Gerardo, J.B.; Raymond, T.D.

1992-12-29

Method and apparatus for generating x-rays for use in, for instance, x-ray photolithography is disclosed. The method of generating x-rays includes the steps of providing a target and irradiating the target with a laser system which produces a train of sub-pulses to generate an x-ray producing plasma. The sub-pulses are of both high intensity and short duration. The apparatus for generating x-rays from a plasma includes a vacuum chamber, a target supported within the chamber and a laser system, including a short storage time laser. 8 figs.

Submillimeter Spectroscopic Study of Semiconductor Processing Plasmas

NASA Astrophysics Data System (ADS)

Helal, Yaser H.

Plasmas used for manufacturing processes of semiconductor devices are complex and challenging to characterize. The development and improvement of plasma processes and models rely on feedback from experimental measurements. Current diagnostic methods are not capable of measuring absolute densities of plasma species with high resolution without altering the plasma, or without input from other measurements. At pressures below 100 mTorr, spectroscopic measurements of rotational transitions in the submillimeter/terahertz (SMM) spectral region are narrow enough in relation to the sparsity of spectral lines that absolute specificity of measurement is possible. The frequency resolution of SMM sources is such that spectral absorption features can be fully resolved. Processing plasmas are a similar pressure and temperature to the environment used to study astrophysical species in the SMM spectral region. Many of the molecular neutrals, radicals, and ions present in processing plasmas have been studied in the laboratory and their absorption spectra have been cataloged or are in the literature for the purpose of astrophysical study. Recent developments in SMM devices have made its technology commercially available for applications outside of specialized laboratories. The methods developed over several decades in the SMM spectral region for these laboratory studies are directly applicable for diagnostic measurements in the semiconductor manufacturing industry. In this work, a continuous wave, intensity calibrated SMM absorption spectrometer was developed as a remote sensor of gas and plasma species. A major advantage of intensity calibrated rotational absorption spectroscopy is its ability to determine absolute concentrations and temperatures of plasma species from first principles without altering the plasma environment. An important part of this work was the design of the optical components which couple 500 - 750 GHz radiation through a commercial inductively coupled plasma chamber. The measurement of transmission spectra was simultaneously fit for background and absorption signal. The measured absorption signal was used to calculate absolute densities and temperatures of polar species. Measurements of molecular species were demonstrated for inductively coupled plasmas.

Extreme ultraviolet lithography machine

DOEpatents

Tichenor, Daniel A.; Kubiak, Glenn D.; Haney, Steven J.; Sweeney, Donald W.

2000-01-01

An extreme ultraviolet lithography (EUVL) machine or system for producing integrated circuit (IC) components, such as transistors, formed on a substrate. The EUVL machine utilizes a laser plasma point source directed via an optical arrangement onto a mask or reticle which is reflected by a multiple mirror system onto the substrate or target. The EUVL machine operates in the 10-14 nm wavelength soft x-ray photon. Basically the EUV machine includes an evacuated source chamber, an evacuated main or project chamber interconnected by a transport tube arrangement, wherein a laser beam is directed into a plasma generator which produces an illumination beam which is directed by optics from the source chamber through the connecting tube, into the projection chamber, and onto the reticle or mask, from which a patterned beam is reflected by optics in a projection optics (PO) box mounted in the main or projection chamber onto the substrate. In one embodiment of a EUVL machine, nine optical components are utilized, with four of the optical components located in the PO box. The main or projection chamber includes vibration isolators for the PO box and a vibration isolator mounting for the substrate, with the main or projection chamber being mounted on a support structure and being isolated.

Concerning neutral flux shielding in the U-3M torsatron

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dreval, N. B., E-mail: mdreval@kipt.kharkov.ua

2015-03-15

The volume of the torsatron U-3M vacuum chamber is about 70 m{sup 3}, whereas the plasma volume is about 0.3 m{sup 3}. The large buffer volume of the chamber serves as a source of a substantial neutral flux into the U-3M plasma. A fraction of this flux falls onto the torsatron helical coils located in front of the plasma, due to which the dynamics of neutral influx into the plasma modifies. The shielding of the molecular flux from the buffer volume into the plasma is estimated using numerical calculations. Only about 10% of the incident flux reaches the plasma volume.more » Estimates show that about 20% of atoms escape beyond the helical coils without colliding with them. Under these conditions, the helical coils substantially affect the neutral flux. A discharge regime with a hot low-density plasma produced by a frame antenna is considered. The spatial distribution of the molecular density produced in this regime by the molecular flux from the chamber buffer volume after it has passed between the helical coils is calculated. The contributions of the fluxes emerging from the side and inner surfaces of the helical coils are considered. The calculations show that the shape of the spatial distribution of the molecular density differs substantially from the shape of the magnetic surfaces.« less

High temperature UF6 RF plasma experiments applicable to uranium plasma core reactors

NASA Technical Reports Server (NTRS)

Roman, W. C.

1979-01-01

An investigation was conducted using a 1.2 MW RF induction heater facility to aid in developing the technology necessary for designing a self critical fissioning uranium plasma core reactor. Pure, high temperature uranium hexafluoride (UF6) was injected into an argon fluid mechanically confined, steady state, RF heated plasma while employing different exhaust systems and diagnostic techniques to simulate and investigate some potential characteristics of uranium plasma core nuclear reactors. The development of techniques and equipment for fluid mechanical confinement of RF heated uranium plasmas with a high density of uranium vapor within the plasma, while simultaneously minimizing deposition of uranium and uranium compounds on the test chamber peripheral wall, endwall surfaces, and primary exhaust ducts, is discussed. The material tests and handling techniques suitable for use with high temperature, high pressure, gaseous UF6 are described and the development of complementary diagnostic instrumentation and measurement techniques to characterize the uranium plasma, effluent exhaust gases, and residue deposited on the test chamber and exhaust system components is reported.

RF H-minus ion source development in China spallation neutron source

NASA Astrophysics Data System (ADS)

Chen, W.; Ouyang, H.; Xiao, Y.; Liu, S.; Lü, Y.; Cao, X.; Huang, T.; Xue, K.

2017-08-01

China Spallation Neutron Source (CSNS) phase-I project currently uses a Penning surface plasma H- ion source, which has a life time of several weeks with occasional sparks between high voltage electrodes. To extend the life time of the ion source and prepare for the CSNS phase-II, we are trying to develop a RF negative hydrogen ion source with external antenna. The configuration of the source is similar to the DESY external antenna ion source and SNS ion source. However several changes are made to improve the stability and the life time. Firstly, Si3N4 ceramic with high thermal shock resistance, and high thermal conductivity is used for plasma chamber, which can endure an average power of 2000W. Secondly, the water-cooled antenna is brazed on the chamber to improve the energy efficiency. Thirdly, cesium is injected directly to the plasma chamber if necessary, to simplify the design of the converter and the extraction. Area of stainless steel exposed to plasma is minimized to reduce the sputtering and degassing. Instead Mo, Ta, and Pt coated materials are used to face the plasma, which makes the self-cleaning of the source possible.

Laser-heated rocket thruster

NASA Technical Reports Server (NTRS)

Shoji, J. M.

1977-01-01

A space vehicle application using 5,000-kw input laser power was conceptually evaluated. A detailed design evaluation of a 10-kw experimental thruster including plasma size, chamber size, cooling, and performance analyses, was performed for 50 psia chamber pressure and using hydrogen as a propellant. The 10-kw hardware fabricated included a water cooled chamber, an uncooled copper chamber, an injector, igniters, and a thrust stand. A 10-kw optical train was designed.

Patterning and Characterization of Carbon Nanotubes Grown in a Microwave Plasma Enhanced Chemical Vapor Deposition Chamber

DTIC Science & Technology

2009-03-01

display [6] of walls can go from two (D- MWCNTs ) to no limit. The distance between the tubes is approximately 0.34 nm closely matching the graphene sheet... MWCNT . . . . . . . . . . . . . . . . . . 9 2.5. Chiral Vector . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9 2.6. Arc Discharge Reactor...17 2.15. MWCNTs from 260 nm Ni Dots . . . . . . . . . . . . . . . . . 19 2.16. Process Flow for Eom Technique

Segmented saddle-shaped passive stabilization conductors for toroidal plasmas

DOEpatents

Leuer, J.A.

1990-05-01

A large toroidal vacuum chamber for plasma generation and confinement is lined with a toroidal blanket for shielding using modules segmented in the toroidal direction. To provide passive stabilization in the same manner as a conductive vacuum chamber wall, saddle-shaped conductor loops are provided on blanket modules centered on a midplane of the toroidal chamber with horizontal conductive bars above and below the midplane, and vertical conductive legs on opposite sides of each module to provide return current paths between the upper and lower horizontal conductive bars. The close proximity of the vertical legs provided on adjacent modules without making physical contact cancel the electromagnetic field of adjacent vertical legs. The conductive bars spaced equally above and below the midplane simulate toroidal conductive loops or hoops that are continuous, for vertical stabilization of the plasma even though they are actually segmented. 5 figs.

Cl atom recombination on silicon oxy-chloride layers deposited on chamber walls in chlorine-oxygen plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Khare, Rohit; Srivastava, Ashutosh; Donnelly, Vincent M.

2012-09-15

Chlorine atom recombination coefficients were measured on silicon oxy-chloride surfaces deposited in a chlorine inductively coupled plasma (ICP) with varying oxygen concentrations, using the spinning wall technique. A small cylinder embedded in the walls of the plasma reactor chamber was rapidly rotated, repetitively exposing its surface to the plasma chamber and a differentially pumped analysis chamber housing a quadruple mass spectrometer for line-of-sight desorbing species detection, or an Auger electron spectrometer for in situ surface analysis. The spinning wall frequency was varied from 800 to 30 000 rpm resulting in a detection time, t (the time a point on themore » surface takes to rotate from plasma chamber to the position facing the mass or Auger spectrometer), of {approx}1-40 ms. Desorbing Cl{sub 2}, due to Langmuir-Hinshelwood (LH) Cl atom recombination on the reactor wall surfaces, was detected by the mass spectrometer and also by a pressure rise in one of the differentially pumped chambers. LH Cl recombination coefficients were calculated by extrapolating time-resolved desorption decay curves to t = 0. A silicon-covered electrode immersed in the plasma was either powered at 13 MHz, creating a dc bias of -119 V, or allowed to electrically float with no bias power. After long exposure to a Cl{sub 2} ICP without substrate bias, slow etching of the Si wafer coats the chamber and spinning wall surfaces with an Si-chloride layer with a relatively small amount of oxygen (due to a slow erosion of the quartz discharge tube) with a stoichiometry of Si:O:Cl = 1:0.38:0.38. On this low-oxygen-coverage surface, any Cl{sub 2} desorption after LH recombination of Cl was below the detection limit. Adding 5% O{sub 2} to the Cl{sub 2} feed gas stopped etching of the Si wafer (with no rf bias) and increased the oxygen content of the wall deposits, while decreasing the Cl content (Si:O:Cl = 1:1.09:0.08). Cl{sub 2} desorption was detectable for Cl recombination on the spinning wall surface coated with this layer, and a recombination probability of {gamma}{sub Cl} = 0.03 was obtained. After this surface was conditioned with a pure oxygen plasma for {approx}60 min, {gamma}{sub Cl} increased to 0.044 and the surface layer was slightly enriched in oxygen fraction (Si:O:Cl = 1:1.09:0.04). This behavior is attributed to a mechanism whereby Cl LH recombination occurs mainly on chlorinated oxygen sites on the silicon oxy-chloride surface, because of the weak Cl-O bond compared to the Cl-Si bond.« less

Surface plasma source with saddle antenna radio frequency plasma generator.

PubMed

Dudnikov, V; Johnson, R P; Murray, S; Pennisi, T; Piller, C; Santana, M; Stockli, M; Welton, R

2012-02-01

A prototype RF H(-) surface plasma source (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasma source test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA∕kW. Control experiments with H(-) beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing.

Production of N.sup.+ ions from a multicusp ion beam apparatus

DOEpatents

Leung, Ka-Ngo; Kunkel, Wulf B.; Walther, Steven R.

1993-01-01

A method of generating a high purity (at least 98%) N.sup.+ ion beam using a multicusp ion source (10) having a chamber (11) formed by a cylindrical chamber wall (12) surrounded by a plurality of magnets (13), a filament (57) centrally disposed in said chamber, a plasma electrode (36) having an extraction orifice (41) at one end of the chamber, a magnetic filter having two parallel magnets (21, 22) spaced from said plasma electrode (36) and dividing the chamber (11) into arc discharge and extraction regions. The method includes ionizing nitrogen gas in the arc discharge region of the chamber (11), maintaining the chamber wall (12) at a positive voltage relative to the filament (57) and at a magnitude for an optimum percentage of N.sup.+ ions in the extracted ion beams, disposing a hot liner (45) within the chamber and near the chamber wall (12) to limit recombination of N.sup.+ ions into the N.sub.2.sup.+ ions, spacing the magnets (21, 22) of the magnetic filter from each other for optimum percentage of N.sup.3 ions in the extracted ion beams, and maintaining a relatively low pressure downstream of the extraction orifice and of a magnitude (preferably within the range of 3-8.times.10.sup.-4 torr) for an optimum percentage of N.sup.+ ions in the extracted ion beam.

A Plasma Focus Device with a 2-MA Discharge Current as a Hard X-Ray Source

NASA Astrophysics Data System (ADS)

Yurkov, D. I.; Dulatov, A. K.; Lemeshko, B. D.; Andreev, D. A.; Golikov, A. V.; Mikhailov, Yu. V.; Prokuratov, I. A.; Selifanov, A. N.; Fatiev, T. S.

2018-04-01

A device based on a pulsed current generator with capacitive energy storage loaded on a plasma focus (PF) chamber is described. The device provides a discharge current amplitude of up to 2 MA in the PF chamber at a stored energy in the capacitor bank of up to 150 kJ. The PF chamber is designed to study hard X-ray (HXR) emission. It has windows for output of HXR emission in the cathode direction, as well as a special insert for output of HXR emission into the anode cavity. A study of operation of the chamber as a part of the setup with the use of various X-ray targets on the anode has been carried out. At a discharge current of 1.5MA, an HXR pulse with an average duration of 16 ns and energy spectrum from 10 to 200 keV, which provides an absorbed dose in the irradiated samples on the order of 1 Sv, is generated in the PF chamber.

Spectroscopy of reactive species produced by low-energy atmospheric-pressure plasma on conductive target material surface

NASA Astrophysics Data System (ADS)

Yamada, Hiromasa; Sakakita, Hajime; Kato, Susumu; Kim, Jaeho; Kiyama, Satoru; Fujiwara, Masanori; Itagaki, Hirotomo; Okazaki, Toshiya; Ikehara, Sanae; Nakanishi, Hayao; Shimizu, Nobuyuki; Ikehara, Yuzuru

2016-10-01

A method for blood coagulation using low-energy atmospheric-pressure plasma (LEAPP) is confirmed as an alternative procedure to reduce tissue damage caused by heat. Blood coagulation using LEAPP behaves differently depending on working gas species; helium is more effective than argon in promoting fast coagulation. To analyse the difference in reactive species produced by helium and argon plasma, spectroscopic measurements were conducted without and with a target material. To compare emissions, blood coagulation experiments using LEAPP for both plasmas were performed under almost identical conditions. Although many kinds of reactive species such as hydroxyl radicals and excited nitrogen molecules were observed with similar intensity in both plasmas, intensities of nitrogen ion molecules and nitric oxide molecules were extremely strong in the helium plasma. It is considered that nitrogen ion molecules were mainly produced by penning ionization by helium metastable. Near the target, a significant increase in the emissions of reactive species is observed. There is a possibility that electron acceleration was induced in a local electric field formed on the surface. However, in argon plasma, emissions from nitrogen ion were not measured even near the target surface. These differences between the two plasmas may be producing the difference in blood coagulation behaviour. To control the surrounding gas of the plasma, a gas-component-controllable chamber was assembled. Filling the chamber with O2/He or N2/He gas mixtures selectively produces either reactive oxygen species or reactive nitrogen species. Through selective treatments, this chamber would be useful in studying the effects of specific reactive species on blood coagulation.

Niobium thin film coating on a 500-MHz copper cavity by plasma deposition

DOE Office of Scientific and Technical Information (OSTI.GOV)

Haipeng Wang; Genfa Wu; H. Phillips

2005-05-16

A system using an Electron Cyclotron Resonance (ECR) plasma source for the deposition of a thin niobium film inside a copper cavity for superconducting accelerator applications has been designed and is being constructed. The system uses a 500-MHz copper cavity as both substrate and vacuum chamber. The ECR plasma will be created to produce direct niobium ion deposition. The central cylindrical grid is DC biased to control the deposition energy. This paper describes the design of several subcomponents including the vacuum chamber, RF supply, biasing grid and magnet coils. Operational parameters are compared between an operating sample deposition system andmore » this system. Engineering work progress toward the first plasma creation will be reported here.« less

Gas laser with dual plasma mixing

DOEpatents

Pinnaduwage, L.A.

1999-04-06

A gas laser includes an enclosure forming a first chamber, a second chamber and a lasing chamber which communicates through a first opening to the first chamber and through a second opening to the second chamber. The lasing chamber has a pair of reflectors defining a Fabry-Perot cavity. Separate inlets enable different gases to be introduced into the first and second chambers. A first cathode within the first chamber is provided to produce positive ions which travel into the lasing chamber and a second cathode of a pin-hollow type within the second chamber is provided to produce negative ions which travel into the lasing chamber. A third inlet introduces a molecular gas into the lasing chamber, where the molecular gas becomes excited by the positive and negative ions and emits light which lases in the Fabry-Perot cavity. 2 figs.

Gas laser with dual plasma mixing

DOEpatents

Pinnaduwage, Lal A.

1999-01-01

A gas laser includes an enclosure forming a first chamber, a second chamber and a lasing chamber which communicates through a first opening to the first chamber and through a second opening to the second chamber. The lasing chamber has a pair of reflectors defining a Fabry-Perot cavity. Separate inlets enable different gases to be introduced into the first and second chambers. A first cathode within the first chamber is provided to produce positive ions which travel into the lasing chamber and a second cathode of a pin-hollow type within the second chamber is provided to produce negative ions which travel into the lasing chamber. A third inlet introduces a molecular gas into the lasing chamber, where the molecular gas becomes excited by the positive and negative ions and emits light which lases in the Fabry-Perot cavity.

Vacuum system design and tritium inventory for the charge exchange diagnostic on the Tokamak Fusion Test Reactor

DOE Office of Scientific and Technical Information (OSTI.GOV)

Medley, S.S.

The application of charge exchange analyzers for the measurement of ion temperature in fusion plasma experiments requires a direct connection between the diagnostic and plasma-discharge vacuum chambers. Differential pumping of the gas load from the diagnostic stripping cell operated at > or approx. = 10/sup -3/ Torr is required to maintain the analyzer chamber at a pressure of < or approx. = 10/sup -6/ Torr. The migration of gases between the diagnostic and plasma vacuum chambers must be minimized. In particular, introduction of the analyzer stripping cell gas into the plasma chamber having a base pressure of < or approx.more » = 10/sup -8/ Torr must be suppressed. The charge exchange diagnostic for the Tokamak Fusion Test Reactor (TFTR) is comprised of two analyzer systems designed to contain a total of 18 independent mass/energy analyzers and one diagnostic neutral beam rated at 80 keV, 15 A. The associated arrays of multiple, interconnected vacuum systems were analyzed using the Vacuum System Transient Simulator (Vsts) computer program which models the transient transport of multigas species through complex networks of ducts, valves, traps, vacuum pumps, and other related vacuum system components. In addition to providing improved design performance at reduced costs, the analysis yields estimates for the exchange of tritium from the torus to the diagnostic components and of the diagnostic working gases to the torus.« less

Experiments with planar inductive ion source meant for creation of H+ beams.

PubMed

Vainionpaa, J H; Kalvas, T; Hahto, S K; Reijonen, J

2007-06-01

In this article the effects of different engineering parameters of rf-driven ion sources with an external spiral antenna and a quartz rf window are studied. This article consists of three main topics: the effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species, and the effect of different antenna geometries on the extracted current density. The effect of source geometry was studied using three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum (Al) and alumina (Al(2)O(3)). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. The highest measured proton fractions were measured using Al(2)O(3) plasma chamber and no multicusp confinement. For the compared ion sources the source with multicusp confinement and Al(2)O(3) plasma chamber yields the highest current densities. Multicusp confinement increased the maximum extracted current by up to a factor of 2. Plasma production with different antenna geometries were also studied. The highest current density was achieved using 4.5 loop solenoid antenna with 6.0 cm diameter. A slightly lower current density with lower pressure was achieved using a tightly wound 3 loop spiral antenna with 3.3 cm inner diameter and 6 cm outer diameter.

Plasma flame for mass purification of contaminated air with chemical and biological warfare agents

NASA Astrophysics Data System (ADS)

Uhm, Han S.; Shin, Dong H.; Hong, Yong C.

2006-09-01

An elimination of airborne simulated chemical and biological warfare agents was carried out by making use of a plasma flame made of atmospheric plasma and a fuel-burning flame, which can purify the interior air of a large volume in isolated spaces such as buildings, public transportation systems, and military vehicles. The plasma flame generator consists of a microwave plasma torch connected in series to a fuel injector and a reaction chamber. For example, a reaction chamber, with the dimensions of a 22cm diameter and 30cm length, purifies an airflow rate of 5000lpm contaminated with toluene (the simulated chemical agent) and soot from a diesel engine (the simulated aerosol for biological agents). Large volumes of purification by the plasma flame will free mankind from the threat of airborne warfare agents. The plasma flame may also effectively purify air that is contaminated with volatile organic compounds, in addition to eliminating soot from diesel engines as an environmental application.

Status and operation of the Linac4 ion source prototypes

NASA Astrophysics Data System (ADS)

Lettry, J.; Aguglia, D.; Andersson, P.; Bertolo, S.; Butterworth, A.; Coutron, Y.; Dallocchio, A.; Chaudet, E.; Gil-Flores, J.; Guida, R.; Hansen, J.; Hatayama, A.; Koszar, I.; Mahner, E.; Mastrostefano, C.; Mathot, S.; Mattei, S.; Midttun, Ø.; Moyret, P.; Nisbet, D.; Nishida, K.; O'Neil, M.; Ohta, M.; Paoluzzi, M.; Pasquino, C.; Pereira, H.; Rochez, J.; Sanchez Alvarez, J.; Sanchez Arias, J.; Scrivens, R.; Shibata, T.; Steyaert, D.; Thaus, N.; Yamamoto, T.

2014-02-01

CERN's Linac4 45 kV H- ion sources prototypes are installed at a dedicated ion source test stand and in the Linac4 tunnel. The operation of the pulsed hydrogen injection, RF sustained plasma, and pulsed high voltages are described. The first experimental results of two prototypes relying on 2 MHz RF-plasma heating are presented. The plasma is ignited via capacitive coupling, and sustained by inductive coupling. The light emitted from the plasma is collected by viewports pointing to the plasma chamber wall in the middle of the RF solenoid and to the plasma chamber axis. Preliminary measurements of optical emission spectroscopy and photometry of the plasma have been performed. The design of a cesiated ion source is presented. The volume source has produced a 45 keV H- beam of 16-22 mA which has successfully been used for the commissioning of the Low Energy Beam Transport (LEBT), Radio Frequency Quadrupole (RFQ) accelerator, and chopper of Linac4.

The HelCat basic plasma science device

NASA Astrophysics Data System (ADS)

Gilmore, M.; Lynn, A. G.; Desjardins, T. R.; Zhang, Y.; Watts, C.; Hsu, S. C.; Betts, S.; Kelly, R.; Schamiloglu, E.

2015-01-01

The Helicon-Cathode(HelCat) device is a medium-size linear experiment suitable for a wide range of basic plasma science experiments in areas such as electrostatic turbulence and transport, magnetic relaxation, and high power microwave (HPM)-plasma interactions. The HelCat device is based on dual plasma sources located at opposite ends of the 4 m long vacuum chamber - an RF helicon source at one end and a thermionic cathode at the other. Thirteen coils provide an axial magnetic field B >= 0.220 T that can be configured individually to give various magnetic configurations (e.g. solenoid, mirror, cusp). Additional plasma sources, such as a compact coaxial plasma gun, are also utilized in some experiments, and can be located either along the chamber for perpendicular (to the background magnetic field) plasma injection, or at one of the ends for parallel injection. Using the multiple plasma sources, a wide range of plasma parameters can be obtained. Here, the HelCat device is described in detail and some examples of results from previous and ongoing experiments are given. Additionally, examples of planned experiments and device modifications are also discussed.

Investigation of Coatings for Langmuir Probes in an Oxygen-Rich Space Environment

NASA Astrophysics Data System (ADS)

Samaniego, J. I.; Wang, X.; Andersson, L.; Malaspina, D.; Ergun, R.; Horanyi, M.

2017-12-01

The surface properties of the Langmuir probes, such as the one on the MAVEN mission, will change after exposure to upper planetary atmospheres where high concentrations of atomic oxygen and other oxidizing compounds are present. TiN (Titanium Nitride) or DAG (a resin based graphite dispersion) are the most common coatings for current Langmuir probes, yet both of these coatings pose issues when exposed to oxygen-rich space environment. TiN showed reduced surface conductivity while the DAG layers erode with exposure to oxygen. It is known that Iridium (Ir) and Rhenium (Rh) are difficult to oxidize and maintain high conductivity even in their oxidized forms, suggesting them to be good candidates for probe coatings. Oxidation of most metals creates a resistive layer on the surface of the probe that will affect the amount of current being collected at a given voltage during the probe sweep and therefore affect the accuracy of plasma parameters determined by the Langmuir probe (e.g. density, temperature). We present the results of the oxidation effect on the current-voltage curves (I-V curves) and therefore the resulting measured plasma parameters of Ir and Rh wire probes compared with other control metals and coatings (Cu, Ni, TiN) in controlled plasma environments. The oxidation process is performed in an oxygen plasma chamber in which both O+ and O2+ are created and accelerated toward the probes with energies < 10 eV. An argon plasma chamber is used to compare the probe's I-V curves before and after the oxidation process. Our preliminary results indicate that iridium shows the least effect of oxidation on the probe measurements. The second objective of this study is to identify methods that can be used in orbit to clean the surface of Langmuir probes to minimize the effect of exposure to oxidizing compounds.

Research of a possibility of receiving sorbents for a sewage disposal from a wastage of coal preparation factory

NASA Astrophysics Data System (ADS)

Buyantuev, S. L.; Kondratenko, A. S.; Shishulkin, S. Y.; Stebenkova, Y. Y.; Khmelev, A. B.

2017-05-01

The paper presents the results of the studies of the structure and porosity of the coal cake processed by electric arc plasma. The main limiting factor in processing of coal cakes sorbents is their high water content. As a result of coal washing, the main share of water introduced into the cake falls on hard-hydrate and colloidal components. This makes impossible application of traditional processes of manufacturing from a cake of coal sorbents. Using the electric arc intensifies the processes of thermal activation of coal cakes associated with thermal shock, destruction and vapor-gas reactions occurring at the surfaces of the particles at an exposure temperature of up to 3000 °C, which increases the title product outlet (sorbent) and thereby reduces manufacturing costs and improves environmental performance. The investigation of the thermal activation zone is carried out in the plasma reactor chamber by thermal imaging method followed by mapping-and 3D-modeling of temperature fields. the most important physical and chemical properties of the sorbents from coal cake activated by plasma was studied. The obtained results showed the possibility of coal cake thermal activation by electric arc plasma to change its material composition, the appearance of porosity and associated sorption capacity applied for wastewater treatment.

Modeling of plasma chemical processes in the artificial ionized layer in the upper atmosphere by the nanosecond corona discharge

NASA Astrophysics Data System (ADS)

Vikharev, A. L.; Gorbachev, A. M.; Ivanov, O. A.; Kolisko, A. L.; Litvak, A. G.

1993-08-01

The plasma chemical processes in the corona discharge formed in air by a series of high voltage pulses of nanosecond duration are investigated experimentally. The experimental conditions (reduced electric field, duration and repetition frequency of the pulses, gas pressure in the chamber) modeled the regime of creation of the artificial ionized layer (AIL) in the upper atmosphere by a nanosecond microwave discharge. It was found that in a nanosecond microwave discharge predominantly generation of ozone occurs, and that the production of nitrogen dioxide is not large. The energy expenditures for the generation of one O 3 molecule were about 15 eV. On the basis of the experimental results the prognosis of the efficiency of ozone generation in AIL was made.

Nano powders, components and coatings by plasma technique

DOEpatents

McKechnie, Timothy N [Brownsboro, AL; Antony, Leo V. M. [Huntsville, AL; O'Dell, Scott [Arab, AL; Power, Chris [Guntersville, AL; Tabor, Terry [Huntsville, AL

2009-11-10

Ultra fine and nanometer powders and a method of producing same are provided, preferably refractory metal and ceramic nanopowders. When certain precursors are injected into the plasma flame in a reactor chamber, the materials are heated, melted and vaporized and the chemical reaction is induced in the vapor phase. The vapor phase is quenched rapidly to solid phase to yield the ultra pure, ultra fine and nano product. With this technique, powders have been made 20 nanometers in size in a system capable of a bulk production rate of more than 10 lbs/hr. The process is particularly applicable to tungsten, molybdenum, rhenium, tungsten carbide, molybdenum carbide and other related materials.

Nano powders, components and coatings by plasma technique

NASA Technical Reports Server (NTRS)

McKechnie, Timothy N. (Inventor); Antony, Leo V. M. (Inventor); O'Dell, Scott (Inventor); Power, Chris (Inventor); Tabor, Terry (Inventor)

2009-01-01

Ultra fine and nanometer powders and a method of producing same are provided, preferably refractory metal and ceramic nanopowders. When certain precursors are injected into the plasma flame in a reactor chamber, the materials are heated, melted and vaporized and the chemical reaction is induced in the vapor phase. The vapor phase is quenched rapidly to solid phase to yield the ultra pure, ultra fine and nano product. With this technique, powders have been made 20 nanometers in size in a system capable of a bulk production rate of more than 10 lbs/hr. The process is particularly applicable to tungsten, molybdenum, rhenium, tungsten carbide, molybdenum carbide and other related materials.

Correlation of ion and beam current densities in Kaufman thrusters.

NASA Technical Reports Server (NTRS)

Wilbur, P. J.

1973-01-01

In the absence of direct impingement erosion, electrostatic thruster accelerator grid lifetime is defined by the charge exchange erosion that occurs at peak values of the ion beam current density. In order to maximize the thrust from an engine with a specified grid lifetime, the ion beam current density profile should therefore be as flat as possible. Knauer (1970) has suggested this can be achieved by establishing a radial plasma uniformity within the thruster discharge chamber; his tests with the radial field thruster provide an example of uniform plasma properties within the chamber and a flat ion beam profile occurring together. It is shown that, in particular, the ion density profile within the chamber determines the beam current density profile, and that a uniform ion density profile at the screen grid end of the discharge chamber should lead to a flat beam current density profile.

Synthesis of N-graphene using microwave plasma-based methods

NASA Astrophysics Data System (ADS)

Dias, Ana; Tatarova, Elena; Henriques, Julio; Dias, Francisco; Felizardo, Edgar; Abrashev, Miroslav; Bundaleski, Nenad; Cvelbar, Uros

2016-09-01

In this work a microwave atmospheric plasma driven by surface waves is used to produce free-standing graphene sheets (FSG). Carbonaceous precursors are injected into a microwave plasma environment, where decomposition processes take place. The transport of plasma generated gas-phase carbon atoms and molecules into colder zones of plasma reactor results in carbon nuclei formation. The main part of the solid carbon is gradually carried from the ``hot'' plasma zone into the outlet plasma stream where carbon nanostructures assemble and grow. Subsequently, the graphene sheets have been N-doped using a N2-Ar large-scale remote plasma treatment, which consists on placing the FSG on a substrate in a remote zone of the N2-Ar plasma. The samples were treated with different compositions of N2-Ar gas mixtures, while maintaining 1 mbar pressure in the chamber and a power applied of 600 W. The N-doped graphene sheets were characterized by scanning and by high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. Plasma characterization was also performed by optical emission spectroscopy. Work partially funded by Portuguese FCT - Fundacao para a Ciencia e a Tecnologia, under grant SFRH/BD/52413/2013 (PD-F APPLAuSE).

Electrostatic and Electromagnetic Resonances of the Curling probe

NASA Astrophysics Data System (ADS)

Arshadi, Ali; Valadbeigi, Leila; Brinkmann, Ralf Peter

2015-09-01

The term Active Plasma Resonance Spectroscopy denotes a class of plasma diagnostic techniques utilizing the natural ability of plasma to resonate on or near the electron plasma frequency: An electric signal in the GHz range is coupled into the plasma via a probe. The spectral response of the plasma is recorded and a mathematical model is used to find plasma parameters such as the electron density. The curling probe, recently invented by Liang et al., is a novel realization of this concept which has many practical advantages. In particular, it can be miniaturized, and flatly embedded into the chamber wall, enabling monitoring of plasma processes without perturbing them. Physically, the curling probe can be seen as a ``curled'' form of the hairpin probe. Assuming that the effect of the spiralization is negligible, this work investigates the features of a ``straightened'' curling probe by modeling it as a slot-type resonator which is in contact with the plasma. The diffraction of an incident plane wave at the slot is calculated by solving Maxwell's equations and the cold plasma model simultaneously. Electrostatic and Electromagnetic resonances are derived. Good agreement of the analytically computed resonance frequencies with the numerical results of the probe inventors is shown.

Design of a New Superconducting Magnet System for High Strength Minimum-B Fields for ECRIS

DOE Office of Scientific and Technical Information (OSTI.GOV)

Xie, D. Z.; Benitez, J. Y.; Hodgkinson, A.

A novel Mixed Axial and Radial field System (MARS) seeks to enhance the B fields inside the plasma chamber within the limits of a given conductor, thereby making it possible to raise the operating fields for Electron Cyclotron Resonance Ion Sources (ECRISs). The MARS concept consists of a hexagonally shaped closed-loop coil and a set of auxiliary solenoids. The application of MARS will be combined with a hexagonal plasma chamber to maximize the use of the radial fields at the chamber inner surfaces. Calculations using Opera's TOSCA-3D solver have shown that MARS can potentially generate up to 50% higher fieldsmore » and use of only about one half of the same superconducting wire, as compared with existing magnet designs in ECRISs. A MARS magnet system built with Nb 3 Sn coils could generate a high strength minimum-B field of maxima of ≥ 10 T on axis and ~6 T radially in an ECRIS plasma chamber. Following successful development, the MARS magnet system will be the best magnet scheme for the next generation of ECRISs. This paper will present the MARS concept, magnet design, prototyping a copper closed-loop coil, and discussions.« less

Design of a New Superconducting Magnet System for High Strength Minimum-B Fields for ECRIS

DOE PAGES

Xie, D. Z.; Benitez, J. Y.; Hodgkinson, A.; ...

2016-06-01

A novel Mixed Axial and Radial field System (MARS) seeks to enhance the B fields inside the plasma chamber within the limits of a given conductor, thereby making it possible to raise the operating fields for Electron Cyclotron Resonance Ion Sources (ECRISs). The MARS concept consists of a hexagonally shaped closed-loop coil and a set of auxiliary solenoids. The application of MARS will be combined with a hexagonal plasma chamber to maximize the use of the radial fields at the chamber inner surfaces. Calculations using Opera's TOSCA-3D solver have shown that MARS can potentially generate up to 50% higher fieldsmore » and use of only about one half of the same superconducting wire, as compared with existing magnet designs in ECRISs. A MARS magnet system built with Nb 3 Sn coils could generate a high strength minimum-B field of maxima of ≥ 10 T on axis and ~6 T radially in an ECRIS plasma chamber. Following successful development, the MARS magnet system will be the best magnet scheme for the next generation of ECRISs. This paper will present the MARS concept, magnet design, prototyping a copper closed-loop coil, and discussions.« less

Plasma Igniter for Reliable Ignition of Combustion in Rocket Engines

NASA Technical Reports Server (NTRS)

Martin, Adam; Eskridge, Richard

2011-01-01

A plasma igniter has been developed for initiating combustion in liquid-propellant rocket engines. The device propels a hot, dense plasma jet, consisting of elemental fluorine and fluorine compounds, into the combustion chamber to ignite the cold propellant mixture. The igniter consists of two coaxial, cylindrical electrodes with a cylindrical bar of solid Teflon plastic in the region between them. The outer electrode is a metal (stainless steel) tube; the inner electrode is a metal pin (mild steel, stainless steel, tungsten, or thoriated-tungsten). The Teflon bar fits snugly between the two electrodes and provides electrical insulation between them. The Teflon bar may have either a flat surface, or a concave, conical surface at the open, down-stream end of the igniter (the igniter face). The igniter would be mounted on the combustion chamber of the rocket engine, either on the injector-plate at the upstream side of the engine, or on the sidewalls of the chamber. It also might sit behind a valve that would be opened just prior to ignition, and closed just after, in order to prevent the Teflon from melting due to heating from the combustion chamber.

Theoretical investigations of plasma processes in the ion bombardment thruster

NASA Technical Reports Server (NTRS)

Wilhelm, H. E.

1975-01-01

A physical model for a thruster discharge was developed, consisting of a spatially diverging plasma sustained electrically between a small ring cathode and a larger ring anode in a cylindrical chamber with an axial magnetic field. The associated boundary-value problem for the coupled partial differential equations with mixed boundary conditions, which describe the electric potential and the plasma velocity fields, was solved in closed form. By means of quantum-mechanical perturbation theory, a formula for the number S(E) of atoms sputtered on the average by an ion of energy E was derived from first principles. The boundary-value problem describing the diffusion of the sputtered atoms through the surrounding rarefied electron-ion plasma to the system surfaces of ion propulsion systems was formulated and treated analytically. It is shown that outer boundary-value problems of this type lead to a complex integral equation, which requires numerical resolution.

Cell Membrane Softening in Cancer Cells

NASA Astrophysics Data System (ADS)

Schmidt, Sebastian; Händel, Chris; Käs, Josef

Biomechanical properties are useful characteristics and regulators of the cell's state. Current research connects mechanical properties of the cytoskeleton to many cellular processes but does not investigate the biomechanics of the plasma membrane. We evaluated thermal fluctuations of giant plasma membrane vesicles, directly derived from the plasma membranes of primary breast and cervical cells and observed a lowered rigidity in the plasma membrane of malignant cells compared to non-malignant cells. To investigate the specific role of membrane rigidity changes, we treated two cell lines with the Acetyl-CoA carboxylase inhibitor Soraphen A. It changed the lipidome of cells and drastically increased membrane stiffness by up regulating short chained membrane lipids. These altered cells had a decreased motility in Boyden chamber assays. Our results indicate that the thermal fluctuations of the membrane, which are much smaller than the fluctuations driven by the cytoskeleton, can be modulated by the cell and have an impact on adhesion and motility.

Spectroscopic investigations of beam-plasma interactions in an ion plume

NASA Technical Reports Server (NTRS)

Ruyten, W. M.; Friedly, V. J.; Peng, X.; Celenza, J. A.; Keefer, D.

1993-01-01

We report the results of spectroscopic investigations of beam-plasma interactions in the plume from a 3 cm ion source operated on argon. Ion-electron, ion-neutral, and electron-neutral scattering are identified by studying the dependence of neutral and ion emission intensities on chamber pressure and mass flow rate, and by analyzing the emission lineshapes at a non-orthogonal angle to the plume axis. Through the Doppler shift, we are able to separate contributions from fast beam ions and fast charge-exchange neutrals on the one hand, and of slow neutrals and slow ions on the other. We discuss the application of this new technique to the characterization of beam plasma interactions in the downstream region of ion thruster engines, and its potential for identifying the processes which lead to grid erosion.

Development and studies on a compact electron cyclotron resonance plasma source

NASA Astrophysics Data System (ADS)

Ganguli, A.; Tarey, R. D.; Arora, N.; Narayanan, R.

2016-04-01

It is well known that electron cyclotron resonance (ECR) produced plasmas are efficient, high-density plasma sources and have many industrial applications. The concept of a portable compact ECR plasma source (CEPS) would thus become important from an application point of view. This paper gives details of such a CEPS that is both portable and easily mountable on a chamber of any size. It uses a fully integrated microwave line operating at 2.45 GHz, up to 800 W, cw. The required magnetic field is produced by a set of suitably designed NdFeB ring magnets; the device has an overall length of  ≈60 cm and weighs  ≈14 kg including the permanent magnets. The CEPS was attached to a small experimental chamber to judge its efficacy for plasma production. In the pressure range of 0.5-10 mTorr and microwave power of  ≈400-500 W the experiments indicate that the CEPS is capable of producing high-density plasma (≈9  ×  1011-1012 cm-3) with bulk electron temperature in the range  ≈2-3 eV. In addition, a warm electron population with density and temperature in the range ≈7  ×  108-109 cm-3 and  ≈45-80 eV, respectively has been detected. This warm population plays an important role at high pressures in maintaining the high-density plasma, when plasma flow from the CEPS into the test chamber is strongly affected.

Applications of DC-Self Bias in CCP Deposition Systems

NASA Astrophysics Data System (ADS)

Keil, D. L.; Augustyniak, E.; Sakiyama, Y.

2013-09-01

In many commercial CCP plasma process systems the DC-self bias is available as a reported process parameter. Since commercial systems typically limit the number of onboard diagnostics, there is great incentive to understand how DC-self bias can be expected to respond to various system perturbations. This work reviews and examines DC self bias changes in response to tool aging, chamber film accumulation and wafer processing. The diagnostic value of the DC self bias response to transient and various steady state current draw schemes are examined. Theoretical models and measured experimental results are compared and contrasted.

Ion electric propulsion unit

DOEpatents

Light, Max E; Colestock, Patrick L

2014-01-28

An electron cyclotron resonance (ECR) thruster is disclosed having a plasma chamber which is electrically biased with a positive voltage. The chamber bias serves to efficiently accelerate and expel the positive ions from the chamber. Electrons follow the exiting ions, serving to provide an electrically neutral exhaust plume. In a further embodiment, a downstream shaping magnetic field serves to further accelerate and/or shape the exhaust plume.

Faraday imaging at high temperatures

DOEpatents

Hackel, L.A.; Reichert, P.

1997-03-18

A Faraday filter rejects background light from self-luminous thermal objects, but transmits laser light at the passband wavelength, thus providing an ultra-narrow optical bandpass filter. The filter preserves images so a camera looking through a Faraday filter at a hot target illuminated by a laser will not see the thermal radiation but will see the laser radiation. Faraday filters are useful for monitoring or inspecting the uranium separator chamber in an atomic vapor laser isotope separation process. Other uses include viewing welds, furnaces, plasma jets, combustion chambers, and other high temperature objects. These filters are can be produced at many discrete wavelengths. A Faraday filter consists of a pair of crossed polarizers on either side of a heated vapor cell mounted inside a solenoid. 3 figs.

Faraday imaging at high temperatures

DOEpatents

Hackel, Lloyd A.; Reichert, Patrick

1997-01-01

A Faraday filter rejects background light from self-luminous thermal objects, but transmits laser light at the passband wavelength, thus providing an ultra-narrow optical bandpass filter. The filter preserves images so a camera looking through a Faraday filter at a hot target illuminated by a laser will not see the thermal radiation but will see the laser radiation. Faraday filters are useful for monitoring or inspecting the uranium separator chamber in an atomic vapor laser isotope separation process. Other uses include viewing welds, furnaces, plasma jets, combustion chambers, and other high temperature objects. These filters are can be produced at many discrete wavelengths. A Faraday filter consists of a pair of crossed polarizers on either side of a heated vapor cell mounted inside a solenoid.

Characteristic time for halo current growth and rotation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Boozer, Allen H., E-mail: ahb17@columbia.edu

2015-10-15

A halo current flows for part of its path through the plasma edge and for part through the chamber walls and during tokamak disruptions can be as large as tenths of the plasma current. The primary interest in halo currents is the large force that they can exert on machine components particularly if the toriodal rotation of the halo current resonates with a natural oscillation frequency of the tokamak device. Halo currents arise when required to slow down the growth of a kink that is too unstable to be stabilized by the chamber walls. The width of the current channelmore » in the halo plasma is comparable to the amplitude of the kink, and the halo current grows linearly, not exponentially, in time. The current density in the halo is comparable to that of the main plasma body. The rocket force due to plasma flowing out of the halo and recombining on the chamber walls can cause the non-axisymmetric magnetic structure produced by the kink to rotate toroidally at a speed comparable to the halo speed of sound. Gerhardt's observations of the halo current in NSTX shot 141 687 [Nucl. Fusion 53, 023005 (2013)] illustrate many features of the theory of halo currents and are discussed as a summary of the theory.« less

Development of a plasma focus neutron source powered by an explosive magnetic generator

NASA Astrophysics Data System (ADS)

Ablesimov, V. E.; Andrianov, A. V.; Bazanov, A. A.; Glybin, A. M.; Dolin, Yu. N.; Drozdov, I. Yu.; Drozdov, Yu. M.; Duday, P. V.; Zimenkov, A. A.; Ivanov, V. A.; Ivanovskii, A. V.; Kalinychev, A. E.; Karpov, G. V.; Kraev, A. I.; Lomtev, S. S.; Nudikov, V. N.; Pak, S. V.; Pozdov, N. I.; Polyushko, S. M.; Rybakov, A. F.; Skobelev, A. N.; Turov, A. N.; Fevralev, A. Yu.

2015-01-01

This paper presents the results of laboratory and explosive experiments with a plasma focus discharge Mather-type chamber at a discharge current amplitude of 1.3-1.4 MA. It has been found that in laboratory experiments, the yield of a deuterium-deuterium neutrons reached 1011, and in an explosive experiment using the chamber filled with a deuterium-tritium gas mixture, the integral yield of a deuterium-tritium neutrons with an energy of 14 MeV was more than 1012 neutrons.

Characterization of a low pressure supersonic plasma jet

NASA Astrophysics Data System (ADS)

Caldirola, S.; Barni, R.; Riccardi, C.

2014-11-01

Plasma assisted supersonic jet deposition (PA-SJD) is a technique which combines a inductively coupled plasma (ICP) with a supersonic jet for the fabrication of thin films having a desired morphology. A reactive argon-oxygen plasma is employed to dissociate an organic precursor (titanium tetra-isopropoxide for TiO2 thin films) in a first vacuum chamber which is connected through a nozzle to a lower pressure chamber. The pressure difference produces a supersonic jet, seeded with nanoparticles. Along the jet the nucleation and aggregation of nanoparticles can be controlled to obtain nanostructured depositions. We report here the results of an analysis performed with a quadrupole mass spectrometer (QMS) which was used to sample neutrals and ions from the jet at different positions along the centerline of the supersonic expansion.

Influence of the electron cyclotron resonance plasma confinement on reducing the bremsstrahlung production of an electron cyclotron resonance ion source with metal-dielectric structures.

PubMed

Schachter, L; Stiebing, K E; Dobrescu, S

2009-01-01

The influence of metal-dielectric (MD) layers (MD structures) inserted into the plasma chamber of an electron cyclotron resonance ion source (ECRIS) onto the production of electron bremsstrahlung radiation has been studied in a series of dedicated experiments at the 14 GHz ECRIS of the Institut für Kernphysik der Universität Frankfurt. The IKF-ECRIS was equipped with a MD liner, covering the inner walls of the plasma chamber, and a MD electrode, covering the plasma-facing side of the extraction electrode. On the basis of similar extracted currents of highly charged ions, significantly reduced yields of bremsstrahlung radiation for the "MD source" as compared to the standard (stainless steel) source have been measured and can be explained by the significantly better plasma confinement in a MD source as compared to an "all stainless steel" ECRIS.

Laser-Produced Colliding Plasmas on LaPD

NASA Astrophysics Data System (ADS)

Collette, Andrew

2005-10-01

The expansion and interaction of dense plasmas in the presence of a magnetized background plasma is important in many astrophysical processes, among them shocks which transport energy. We study the collision of two dense, laser-produced plasmas expanding perpendicular to the background magnetic field, each with an Alfv'en Mach number of approximately 0.5. The plasmas are launched off of two carbon targets, 9cm apart, by a short pulse of laser energy (Nd:YAG, 1J 8ns). Experiments are currently in progress in a small test chamber at UCLA (background plasma n 3x10^12, 3 meters long, B0<700G) and will shortly be migrated to the LaPD (LArge Plasma Device; n 3x10^12, 18 meters long, 70cm diameter, 400G

Rocket-borne thermal plasma instrument "MIPEX" for the ionosphere D, E layer in-situ measurements

NASA Astrophysics Data System (ADS)

Fang, H. K.; Chen, A. B. C.; Lin, C. C. H.; Wu, T. J.; Liu, K. S.; Chuang, C. W.

2017-12-01

In this presentation, the design concepts, performances and status of a thermal plasma particle instrument package "Mesosphere and Ionosphere Plasma Exploration complex (MIPEX)", which is going to be installed onboard a NSPO-funded hybrid rocket, to investigate the electrodynamic processes in ionosphere D, E layers above Taiwan are reported. MIPEX is capable of measuring plasma characteristics including ion temperature, ion composition, ion drift, electron temperature and plasma density at densities as low as 1-10 cm-1. This instrument package consists of an improved retarding potential analyzer with a channel electron multiplier (CEM), a simplified ion drift meter and a planar Langmuir probe. To achieve the working atmospheric pressure of CEM at the height of lower D layer ( 70km), a portable vacuum pump is also placed in the package. A prototype set of the MIPEX has been developed and tested in the Space Plasma Operation Chamber (SPOC) at NCKU, where in ionospheric plasma is generated by back-diffusion plasma sources. A plasma density of 10-106 cm-1, ion temperature of 300-1500 K and electron temperature of 1000-3000K is measured and verified. Limited by the flight platform and the performance of the instruments, the in-situ plasma measurements at the Mesosphere and lower Thermosphere is very challenging and rare. MIPEX is capable of extending the altitude of the effective plasma measurement down to 70 km height and this experiment can provide unique high-quality data of the plasma environment to explore the ion distribution and the electrodynamic processes in the Ionosphere D, E layers at dusk.

Protection of tokamak plasma facing components by a capillary porous system with lithium

NASA Astrophysics Data System (ADS)

Lyublinski, I.; Vertkov, A.; Mirnov, S.; Lazarev, V.

2015-08-01

Development of plasma facing material (PFM) based on the Capillary-Porous System (CPS) with lithium and activity on realization of lithium application strategy are addressed to meet the challenges under the creation of steady-state tokamak fusion reactor and fusion neutron source. Presented overview of experimental study of lithium CPS in plasma devices demonstrates the progress in protection of tokamak plasma facing components (PFC) from damage, stabilization and self-renewal of liquid lithium surface, elimination of plasma pollution and lithium accumulation in tokamak chamber. The possibility of PFC protection from the high power load related to cooling of the tokamak boundary plasma by radiation of non-fully stripped lithium ions supported by experimental results. This approach demonstrated in scheme of closed loops of Li circulation in the tokamak vacuum chamber and realized in a series of design of tokamak in-vessel elements.

Interaction force in a vertical dust chain inside a glass box.

PubMed

Kong, Jie; Qiao, Ke; Matthews, Lorin S; Hyde, Truell W

2014-07-01

Small number dust particle clusters can be used as probes for plasma diagnostics. The number of dust particles as well as cluster size and shape can be easily controlled employing a glass box placed within a Gaseous Electronics Conference (GEC) rf reference chamber to provide confinement of the dust. The plasma parameters inside this box and within the larger plasma chamber have not yet been adequately defined. Adjusting the rf power alters the plasma conditions causing structural changes of the cluster. This effect can be used to probe the relationship between the rf power and other plasma parameters. This experiment employs the sloshing and breathing modes of small cluster oscillations to examine the relationship between system rf power and the particle charge and plasma screening length inside the glass box. The experimental results provided indicate that both the screening length and dust charge decrease as rf power inside the box increases. The decrease in dust charge as power increases may indicate that ion trapping plays a significant role in the sheath.

The study of the proteome of healthy human blood plasma under conditions of long-term confinement in an isolation chamber.

PubMed

Trifonova, O P; Pastushkova, L Kh; Samenkova, N F; Chernobrovkin, A L; Karuzina, I I; Lisitsa, A V; Larina, I M

2013-05-01

We identified changes in the proteome of healthy human blood plasma caused by exposure to 105-day confinement in an isolation chamber. After removal of major proteins and concentration of minor proteins, plasma fractions were analyzed by two-dimensional electrophoresis followed by identification of significantly different protein spots by mass spectrometric analysis of the peptide fragments. The levels of α- and β-chains of fibrinogen, a fragment of complement factor C4, apolipoproteins AI and E, plasminogen factor C1 complement, and immunoglobulin M changed in participants during the isolation period. These changes probably reflect the adaptive response to altered conditions of life.

Direct measurement of the impulse in a magnetic thrust chamber system for laser fusion rocket

DOE Office of Scientific and Technical Information (OSTI.GOV)

Maeno, Akihiro; Yamamoto, Naoji; Nakashima, Hideki

2011-08-15

An experiment is conducted to measure an impulse for demonstrating a magnetic thrust chamber system for laser fusion rocket. The impulse is produced by the interaction between plasma and magnetic field. In the experiment, the system consists of plasma and neodymium permanent magnets. The plasma is created by a single-beam laser aiming at a polystyrene spherical target. The impulse is 1.5 to 2.2 {mu}Ns by means of a pendulum thrust stand, when the laser energy is 0.7 J. Without magnetic field, the measured impulse is found to be zero. These results indicate that the system for generating impulse is working.

Selective deposition for ''chamber clean-free'' processes using tailored voltage waveform plasmas

NASA Astrophysics Data System (ADS)

Wang, Junkang; v. Johnson, Erik

2016-09-01

Tailored Voltage Waveforms (TVWs) have been proven capable of creating plasma asymmetries in otherwise symmetric CCP reactors. Particularly, sawtooth TVWs (described as having strong slope-asymmetry due to different voltage rise/fall slope) can lead to different sheath dynamics, thus generating strongly asymmetric ionization near each electrode. To date, research concerning the slope-asymmetry has only focused on single-gas plasmas. Herein, we present a study looking at SiF4/H2/Ar mixtures to investigate silicon thin film deposition. The resulting surface process depends strongly on multiple precursors, and the deposition requires a specific balance between surface arrival rates of SiFx and H. For a certain gas flow ratio, we can obtain a deposition rate of 0.82Å/s on one electrode and an etching rate of 1.2Å/s on the other. Moreover, the deposition/etching balance can be controlled by H2 flow and waveform amplitude. This is uniquely possible due to the mixed-gas nature of the process and localized ionization generated by sawtooth TVWs. This encourages the prospect that one could choose process conditions to achieve a variety of desired depositions on one electrode, while leaving the other pristine.

Characterization and Surface Treatment of Materials Used in MADEAL S.A. Industry Productive Process of Rims by Plasma Assisted Repetitive Pulsed Arcs Technique

NASA Astrophysics Data System (ADS)

Jiménez, H.; Salazar, V. H.; Devia, A.; Jaramillo, S.; Velez, G.

2006-12-01

A study of materials used in the molds production to aluminium rims manufacture in the MADEAL S.A. factory was carried out for apply a plasma assisted surface treatment consists in growing TiAlN hard coatings that it protects this molds in the productive process. This coating resists high oxidation temperatures, of the other of 800 °C, high hardness (2800 Vickers) and low friction coefficient. A plasma assisted repetitive pulsed arcs mono-evaporator system was used in the grow of the TiAlN coatings, the TiAlN target is a sinterized 50% Ti and 50% Al, in the substrate they were used two types of steel that compose the molds injection pieces for the rims production. These materials were subjected to linear and fluctuating thermal changes in the Bruker axs X-Ray diffractometer temperature chamber, what simulated the molds thermal variation in the rims production process and they were compared with TiAlN coatings subjected to same thermal changes. The Materials characterization, before and later of thermal process, was carried out using XRD, SPM and EDS techniques, to analyze the crystallographic, topographic and chemical surface structure behaviours.

Experimental observation of ion beams in the Madison Helicon eXperiment

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wiebold, Matt; Sung, Yung-Ta; Scharer, John E.

2011-06-15

Argon ion beams up to E{sub b} = 165 eV at P{sub rf} = 500 W are observed in the Madison Helicon eXperiment (MadHeX) helicon source with a magnetic nozzle. A two-grid retarding potential analyzer (RPA) is used to measure the ion energy distribution, and emissive and rf-filtered Langmuir probes measure the plasma potential, electron density, and temperature. The supersonic ion beam (M = v{sub i}/c{sub s} up to 5) forms over tens of Debye lengths and extends spatially for a few ion-neutral charge-exchange mean free paths. The parametric variation of the ion beam energy is explored, including flow rate,more » rf power, and magnetic field dependence. The beam energy is equal to the difference in plasma potentials in the Pyrex chamber and the grounded expansion chamber. The plasma potential in the expansion chamber remains near the predicted eV{sub p} {approx} 5kT{sub e} for argon, but the upstream potential is much higher, likely due to wall charging, resulting in accelerated ion beam energies E{sub b} = e[V{sub beam} - V{sub plasma}] > 10kT{sub e}.« less

Textured carbon surfaces on copper by sputtering

NASA Technical Reports Server (NTRS)

Curren, A. N. (Inventor); Jensen, K. A. (Inventor); Roman, R. F. (Inventor)

1986-01-01

A very thin layer of highly textured carbon is applied to a copper surface by a triode sputtering process. A carbon target and a copper substrate are simultaneously exposed to an argon plasma in a vacuum chamber. The resulting carbon surface is characterized by a dense, random array of needle like spires or peaks which extend perpendicularly from the copper surface. The coated copper is especially useful for electrode plates in multistage depressed collectors.

Electrohydraulic Forming of Near-Net Shape Automotive Panels

DOE Office of Scientific and Technical Information (OSTI.GOV)

Golovaschenko, Sergey F.

2013-09-26

The objective of this project was to develop the electrohydraulic forming (EHF) process as a near-net shape automotive panel manufacturing technology that simultaneously reduces the energy embedded in vehicles and the energy consumed while producing automotive structures. Pulsed pressure is created via a shockwave generated by the discharge of high voltage capacitors through a pair of electrodes in a liquid-filled chamber. The shockwave in the liquid initiated by the expansion of the plasma channel formed between two electrodes propagates towards the blank and causes the blank to be deformed into a one-sided die cavity. The numerical model of the EHFmore » process was validated experimentally and was successfully applied to the design of the electrode system and to a multi-electrode EHF chamber for full scale validation of the process. The numerical model was able to predict stresses in the dies during pulsed forming and was validated by the experimental study of the die insert failure mode for corner filling operations. The electrohydraulic forming process and its major subsystems, including durable electrodes, an EHF chamber, a water/air management system, a pulse generator and integrated process controls, were validated to be capable to operate in a fully automated, computer controlled mode for forming of a portion of a full-scale sheet metal component in laboratory conditions. Additionally, the novel processes of electrohydraulic trimming and electrohydraulic calibration were demonstrated at a reduced-scale component level. Furthermore, a hybrid process combining conventional stamping with EHF was demonstrated as a laboratory process for a full-scale automotive panel formed out of AHSS material. The economic feasibility of the developed EHF processes was defined by developing a cost model of the EHF process in comparison to the conventional stamping process.« less

Optimization of steam-vortex plasma-torch start-up

NASA Astrophysics Data System (ADS)

Mikhailov, B. I.

2011-12-01

We propose a new optimal method of steam-vortex plasma-torches start-up; this method completely prevents the danger of water steam condensation in the arc chamber and all undesirable consequences of it.

Caprine Abscess Model of Tulathromycin Concentrations in Interstitial Fluid from Tissue Chambers Inoculated with Corynebacterium pseudotuberculosis following Subcutaneous or Intrachamber Administration

PubMed Central

Fajt, V. R.; Lawhon, S. D.; Adams, L. G.; Tell, L. A.; Bissett, W. T.

2013-01-01

Corynebacterium pseudotuberculosis causes chronic, suppurative, abscessing conditions in livestock and humans. We used an in vivo model to evaluate antimicrobial efficacy for focal abscesses caused by C. pseudotuberculosis. Tissue chambers were surgically implanted in the subcutaneous tissues of the right and left paralumbar fossa of 12 goats to serve as a model for isolated, focal abscesses. For each goat, one tissue chamber was inoculated with C. pseudotuberculosis, while the contralateral chamber served as an uninoculated control. Six goats were administered a single dose of tulathromycin at 2.5 mg/kg of body weight subcutaneously, while the other six received the same dose by injection directly into the inoculated chambers. Our objective was to compare the effects and tulathromycin concentrations in interstitial fluid (IF) samples collected from C. pseudotuberculosis-infected and control chambers following subcutaneous or intrachamber injection of tulathromycin. In addition, the effects of tulathromycin on the quantity of C. pseudotuberculosis reisolated from inoculated chambers were assessed over time. Tulathromycin IF concentrations from C. pseudotuberculosis-infected and control tissue chambers were similar to those in plasma following subcutaneous administration. Following intrachamber administration, tulathromycin IF concentrations in infected chambers were continuously above the MIC for the C. pseudotuberculosis isolate for 15 days. There were no significant differences for plasma area under the curve and elimination half-lives between subcutaneous and intrachamber administration. Six of the 12 infected chambers had no growth of C. pseudotuberculosis 15 days postadministration. Results of this study indicate that tulathromycin may be beneficial in the treatment of focal infections such as those caused by C. pseudotuberculosis. PMID:24100501

Membrane-based, sedimentation-assisted plasma separator for point-of-care applications.

PubMed

Liu, Changchun; Mauk, Michael; Gross, Robert; Bushman, Frederic D; Edelstein, Paul H; Collman, Ronald G; Bau, Haim H

2013-11-05

Often, high-sensitivity, point-of-care (POC) clinical tests, such as HIV viral load, require large volumes of plasma. Although centrifuges are ubiquitously used in clinical laboratories to separate plasma from whole blood, centrifugation is generally inappropriate for on-site testing. Suitable alternatives are not readily available to separate the relatively large volumes of plasma from milliliters of blood that may be needed to meet stringent limit-of-detection specifications for low-abundance target molecules. We report on a simple-to-use, low-cost, pump-free, membrane-based, sedimentation-assisted plasma separator capable of separating a relatively large volume of plasma from undiluted whole blood within minutes. This plasma separator consists of an asymmetric, porous, polysulfone membrane housed in a disposable chamber. The separation process takes advantage of both gravitational sedimentation of blood cells and size exclusion-based filtration. The plasma separator demonstrated a "blood in-plasma out" capability, consistently extracting 275 ± 33.5 μL of plasma from 1.8 mL of undiluted whole blood within less than 7 min. The device was used to separate plasma laden with HIV viruses from HIV virus-spiked whole blood with recovery efficiencies of 95.5% ± 3.5%, 88.0% ± 9.5%, and 81.5% ± 12.1% for viral loads of 35,000, 3500, and 350 copies/mL, respectively. The separation process is self-terminating to prevent excessive hemolysis. The HIV-laden plasma was then injected into our custom-made microfluidic chip for nucleic acid testing and was successfully subjected to reverse-transcriptase loop-mediated isothermal amplification (RT-LAMP), demonstrating that the plasma is sufficiently pure to support high-efficiency nucleic acid amplification.

Membrane-based, sedimentation-assisted plasma separator for point-of-care applications

PubMed Central

Liu, Changchun; Mauk, Michael; Gross, Robert; Bushman, Frederic D.; Edelstein, Paul H.; Collman, Ronald G.; Bau, Haim H.

2014-01-01

Often, high sensitivity, point of care, clinical tests, such as HIV viral load, require large volumes of plasma. Although centrifuges are ubiquitously used in clinical laboratories to separate plasma from whole blood, centrifugation is generally inappropriate for on-site testing. Suitable alternatives are not readily available to separate the relatively large volumes of plasma from milliliters of blood that may be needed to meet stringent limit-of-detection specifications for low abundance target molecules. We report on a simple to use, low-cost, pump-free, membrane-based, sedimentation-assisted plasma separator capable of separating a relatively large volume of plasma from undiluted whole blood within minutes. This plasma separator consists of an asymmetric, porous, polysulfone membrane housed in a disposable chamber. The separation process takes advantage of both gravitational sedimentation of blood cells and size exclusion-based filtration. The plasma separator demonstrated a “blood in-plasma out” capability, consistently extracting 275 ±33.5 μL of plasma from 1.8 mL of undiluted whole blood in less than 7 min. The device was used to separate plasma laden with HIV viruses from HIV virus-spiked whole blood with recovery efficiencies of 95.5% ± 3.5%, 88.0% ± 9.5%, and 81.5% ± 12.1% for viral loads of 35,000, 3,500 and 350 copies/mL, respectively. The separation process is self-terminating to prevent excessive hemolysis. The HIV-laden plasma was then injected into our custom-made microfluidic chip for nucleic acid Testing And Was Successfully Subjected To Reverse Transcriptase Loop mediated isothermal amplification (RT-LAMP), demonstrating that the plasma is sufficiently pure to support high efficiency nucleic acid amplification. PMID:24099566

Corona-discharge air-purification system

NASA Technical Reports Server (NTRS)

Wydeven, T. J.; Flamm, D. L.

1979-01-01

Plasma reaction chamber removes trace contaminants from spacecraft, submarines, and other closed environments by oxidizing contaminants to produce carbon dioxide and water. Contaminants are alcohols, esters, hydrogen sulfide, and ammonia. Others are lubricant solvents such as Freons, aromatics, and Ketones. Contaminants are removed from chamber by scrubber.

Polysilicon planarization and plug recess etching in a decoupled plasma source chamber using two endpoint techniques

NASA Astrophysics Data System (ADS)

Kaplita, George A.; Schmitz, Stefan; Ranade, Rajiv; Mathad, Gangadhara S.

1999-09-01

The planarization and recessing of polysilicon to form a plug are processes of increasing importance in silicon IC fabrication. While this technology has been developed and applied to DRAM technology using Trench Storage Capacitors, the need for such processes in other IC applications (i.e. polysilicon studs) has increased. Both planarization and recess processes usually have stringent requirements on etch rate, recess uniformity, and selectivity to underlying films. Additionally, both processes generally must be isotropic, yet must not expand any seams that might be present in the polysilicon fill. These processes should also be insensitive to changes in exposed silicon area (pattern factor) on the wafer. A SF6 plasma process in a polysilicon DPS (Decoupled Plasma Source) reactor has demonstrated the capability of achieving the above process requirements for both planarization and recess etch. The SF6 process in the decoupled plasma source reactor exhibited less sensitivity to pattern factor than in other types of reactors. Control of these planarization and recess processes requires two endpoint systems to work sequentially in the same recipe: one for monitoring the endpoint when blanket polysilicon (100% Si loading) is being planarized and one for monitoring the recess depth while the plug is being recessed (less than 10% Si loading). The planarization process employs an optical emission endpoint system (OES). An interferometric endpoint system (IEP), capable of monitoring lateral interference, is used for determining the recess depth. The ability of using either or both systems is required to make these plug processes manufacturable. Measuring the recess depth resulting from the recess process can be difficult, costly and time- consuming. An Atomic Force Microscope (AFM) can greatly alleviate these problems and can serve as a critical tool in the development of recess processes.

Particulate contamination removal from wafers using plasmas and mechanical agitation

DOEpatents

Selwyn, G.S.

1998-12-15

Particulate contamination removal from wafers is disclosed using plasmas and mechanical agitation. The present invention includes the use of plasmas with mechanical agitation for removing particulate matter from the surface of a wafer. The apparatus hereof comprises a mechanical activator, at least one conducting contact pin for transferring the vibration from the activator to the wafer, clamp fingers that maintain the wafer`s position, and means for generating a plasma in the vicinity of the surface of the wafer, all parts of the cleaning apparatus except the mechanical activator and part of the contact pin being contained inside the processing chamber. By exposing a wafer to a plasma and providing motion thereto in a direction perpendicular to its surface, the bonding between the particulate matter and the surface may be overcome. Once free of the wafer surface, the particulates become charged by electrons from the plasma and are drawn into the plasma by attractive forces which keep them from redepositing. The introduction of a flowing gas through the plasma sweeps the particulates away from the wafer and out of the plasma. The entire surface is cleaned during one cleaning step. The use of an rf plasma to accomplish the particulate removal was found to remove more than 90% of the particulates. 4 figs.

Particulate contamination removal from wafers using plasmas and mechanical agitation

DOEpatents

Selwyn, Gary S.

1998-01-01

Particulate contamination removal from wafers using plasmas and mechanical agitation. The present invention includes the use of plasmas with mechanical agitation for removing particulate matter from the surface of a wafer. The apparatus hereof comprises a mechanical activator, at least one conducting contact pin for transferring the vibration from the activator to the wafer, clamp fingers that maintain the wafer's position, and means for generating a plasma in the vicinity of the surface of the wafer, all parts of the cleaning apparatus except the mechanical activator and part of the contact pin being contained inside the processing chamber. By exposing a wafer to a plasma and providing motion thereto in a direction perpendicular to its surface, the bonding between the particulate matter and the surface may be overcome. Once free of the wafer surface, the particulates become charged by electrons from the plasma and are drawn into the plasma by attractive forces which keep them from redepositing. The introduction of a flowing gas through the plasma sweeps the particulates away from the wafer and out of the plasma. The entire surface is cleaned during one cleaning step. The use of an rf plasma to accomplish the particulate removal was found to remove more than 90% of the particulates.

Toroidal midplane neutral beam armor and plasma limiter

DOEpatents

Kugel, H.W.; Hand, S.W. Jr.; Ksayian, H.

1985-05-31

This invention contemplates an armor shield/plasma limiter positioned upon the inner wall of a toroidal vacuum chamber within which is magnetically confined an energetic plasma in a tokamak nuclear fusion reactor. The armor shield/plasma limiter is thus of a general semi-toroidal shape and is comprised of a plurality of adjacent graphite plates positioned immediately adjacent to each other so as to form a continuous ring upon and around the toroidal chamber's inner wall and the reactor's midplane coil. Each plate has a generally semi-circular outer circumference and a recessed inner portion and is comprised of upper and lower half sections positioned immediately adjacent to one another along the midplane of the plate. With the upper and lower half sections thus joined, a channel or duct is provided within the midplane of the plate in which a magnetic flux loop is positioned. The magnetic flux loop is thus positioned immediately adjacent to the fusing toroidal plasma and serves as a diagnostic sensor with the armor shield/plasma limiter minimizing the amount of power from the energetic plasma as well as from the neutral particle beams heating the plasma incident upon the flux loop.

Spheromak plasma flow injection into a torus chamber and the HIST plasmas

NASA Astrophysics Data System (ADS)

Hatuzaki, Akinori

2005-10-01

The importance of plasma flow or two-fluid effect is recognized in understanding the relaxed states of high-beta torus plasmas, start-up and current drive by non-coaxial helicity injection, magnetic reconnection and plasma dynamo in fusion, laboratory and space plasmas. As a new approach to create a flowing two-fluid plasma equilibrium, we have tried to inject tangentially the plasma flow with spheromak-type magnetic configurations into a torus vacuum chamber with an external toroidal magnetic field (TF) coil. In the initial experiments, the RFP-like configuration with helical magnetic structures was realized in the torus vessel. The ion flow measurement with Mach probes showed that the ion flow keeps the same direction despite the reversal of the toroidal current and the axial electric field. The ion fluid comes to flow in the opposite direction to the electron fluid by the reversal of TF. This result suggests that not only electron but also ion flow contributes significantly on the reversed toroidal current. In this case, the ratio of ui to the electron flow velocity ue is estimated as ui/ue ˜ 1/2. We also will inject the spheromak flow into the HIST spherical torus plasmas to examine the possibilities to embedding the two-fluid effect in the ST plasmas.

Slot-Antenna/Permanent-Magnet Device for Generating Plasma

NASA Technical Reports Server (NTRS)

Foster, John E.

2007-01-01

A device that includes a rectangular-waveguide/slot-antenna structure and permanent magnets has been devised as a means of generating a substantially uniform plasma over a relatively large area, using relatively low input power and a low gas flow rate. The device utilizes electron cyclotron resonance (ECR) excited by microwave power to efficiently generate plasma in a manner that is completely electrodeless in the sense that, in principle, there is no electrical contact between the plasma and the antenna. Plasmas generated by devices like this one are suitable for use as sources of ions and/or electrons for diverse material-processing applications (e.g., etching or deposition) and for ion thrusters. The absence of plasma/electrode contact essentially prevents plasma-induced erosion of the antenna, thereby also helping to minimize contamination of the plasma and of objects exposed to the plasma. Consequently, the operational lifetime of the rectangular-waveguide/ slot-antenna structure is long and the lifetime of the plasma source is limited by the lifetime of the associated charged-particle-extraction grid (if used) or the lifetime of the microwave power source. The device includes a series of matched radiating slot pairs that are distributed along the length of a plasma-source discharge chamber (see figure). This arrangement enables the production of plasma in a distributed fashion, thereby giving rise to a uniform plasma profile. A uniform plasma profile is necessary for uniformity in any electron- or ion-extraction electrostatic optics. The slotted configuration of the waveguide/ antenna structure makes the device scalable to larger areas and higher powers. All that is needed for scaling up is the attachment of additional matched radiating slots along the length of the discharge chamber. If it is desired to make the power per slot remain constant in scaling up, then the input microwave power must be increased accordingly. Unlike in prior ECR microwave plasma-generating devices, there is no need for an insulating window on the antenna. Such windows are sources of contamination and gradually become ineffective as they become coated with erosion products over time. These characteristics relegate prior ECR microwave plasma-generating devices to non-ion beam, non-deposition plasma applications. In contrast, the lack of need for an insulating window in the present device makes it possible to use the device in both ion-beam (including deposition) and electron-beam applications. The device is designed so that ECR takes place above each slot and the gradient of the magnetic field at each slot is enough to prevent backflow of plasma.

Plasmakristall-4: A microgravity complex plasma facility on the way to launch

NASA Astrophysics Data System (ADS)

Pustylnik, Mikhail; Thomas, Hubertus; Fortov, Vladimir; Thoma, Markus; Lipaev, Andrey; Morfill, Gregor; Molotkov, Vladimir; Usachev, Alexander; Zobnin, Andrey; Tarantik, Karl; Albrecht, Sebastian; Deysenroth, Christian; Rau, Christian; Mitic, Slobodan; Nosenko, Vladimir; Fink, Martin; Prof

Complex plasmas, a special case of dusty plasmas, are one of the most interesting physical objects to be studied under microgravity conditions. A way from dusty plasmas to complex plasmas was revealed when strong coupling phenomena in the dust subsystem were first theoretically predicted and then observed under ground laboratory conditions. Complex plasmas are, therefore, dusty plasmas, which are prepared intentionally to study generic phenomena of condensed matter physics. Complex plasmas have several advantages in this respect: Real-time, virtually undamped dynamics of the system can be resolved on the kinetic level, i.e. on the level of single microparticles. Under ground laboratory conditions the microparticles are strongly affected by the gravitational force, which has to be compensated by strong electrostatic forces. Therefore, the volume occupied by the microparticles is limited to sheath region. This makes formation of uniform 3D structures under ground condition almost impossible. Microgravity is therefore essential for studying 3D complex plasma systems. The next lab for complex plasma research under mug-conditions will be PK-4, a joint Russian-European project. The special feature of PK-4 (with respect to its predecessor PK-3 Plus on the ISS) is that it will allow to study the fluid phenomena. Geometry of the plasma chamber (a glass tube with the working part of about 200 mm long and 30 mm diameter) implies presence of micropaticle flows along its axis. A custom-made power supply will create either a DC or polarity-switched discharge inside the chamber filled with either neon or argon. In the DC mode the negatively-charged microparticles will drift opposite to the electric field. Polarity switching can be done with up to several kHz frequency, which will allow the discharge to change polarity, whereas heavy microparticles will be insensitive to such fast variations of the electric field. In this way, microparticles will be trapped inside the plasma chamber. For the diagnostics of the microparticles, two CCD cameras and an illumination laser sheet are available. Cameras and the laser focal plane are movable along the plasma chamber and cover almost the entire working area. Moving the laser sheet and cameras across the plasma chamber axis will allow to obtain information on the 3D structure of the microparticle clouds. Background plasma may be monitored by the so-called plasma glow camera, which produces three kaleidoscopic images of the plasma. Two of these images are filtered for two neon spectral lines and the third one represents the integral glow. Also, a spectrometer whose receiving optics is movable together with the cameras is available as a diagnostic means. Several microparticles manipulation techniques are implemented in PK-4, starting from simple discharge current modulation to using a powerful infrared laser exerting radiation pressure on microparticles. The experiment is going to be conducted on board of the International Space Station. The launch is scheduled to October 2014. Even before being launched into orbit, the PK-4 project already delivered lots of interesting scientific results, obtained in ground laboratory and parabolic flight experiments and numerical simulations. First of all, the kinetic model of the discharge was built and the discharge parameters, such as electron density and temperature, number density of metastable atoms were measured. Diagnostic methods are being further developed to be used on orbit. Then, the microscopic properties of the microparticles (i.e. their charge and forces acting on them) were determined using dynamic methods. Size dynamics (growth and etching) of microparticles in PK-4 discharges were studied. Collective plasma phenomena (such as e.g. dust-acoustic) waves were investigated. And, finally, the interdisciplinary experiments, making a link between the PK-4 plasmas and real condensed matter were conducted. Such phenomenon as electrorheology was successfully modelled with PK-4 complex plasmas in a parabolic flight. A review of the results and a roadmap for future orbital operations will be presented in this contribution.

Plasma treatment for producing electron emitters

DOEpatents

Coates, Don Mayo; Walter, Kevin Carl

2001-01-01

Plasma treatment for producing carbonaceous field emission electron emitters is disclosed. A plasma of ions is generated in a closed chamber and used to surround the exposed surface of a carbonaceous material. A voltage is applied to an electrode that is in contact with the carbonaceous material. This voltage has a negative potential relative to a second electrode in the chamber and serves to accelerate the ions toward the carbonaceous material and provide an ion energy sufficient to etch the exposed surface of the carbonaceous material but not sufficient to result in the implantation of the ions within the carbonaceous material. Preferably, the ions used are those of an inert gas or an inert gas with a small amount of added nitrogen.

Research on mutual influence of Cherenkov-type probes within the ISTTOK tokamak chamber

NASA Astrophysics Data System (ADS)

Jakubowski, L.; Plyusnin, V. V.; Malinowski, K.; Sadowski, M. J.; Zebrowski, J.; Rabinski, M.; Fernandes, H.; Silva, C.; Figueiredo, H.; Jakubowski, M. J.

2014-12-01

The paper describes an influence of a Cherenkov-type probe, which is used for measurements of fast electron streams inside the ISTTOK chamber, on other probes and behaviour of a plasma ring. The reported study shows that such a probe situated near the plasma column has a strong influence on signals from another Cherenkov probe, and can cause a considerable reduction of electron-induced signals. This effect does not depend on positions of the probes in relation to the limiter. Measurements of hard X-ray (HXR) emission show that the deeply immersed Cherenkov probe can also influence on the limiter . Under specific experimental conditions such a Cherenkov probe can play the role of a new limiter and change the plasma configuration.

Three chamber negative ion source

DOEpatents

Leung, Ka-Ngo; Ehlers, Kenneth W.; Hiskes, John R.

1985-01-01

A negative ion vessel is divided into an excitation chamber, a negative ionization chamber and an extraction chamber by two magnetic filters. Input means introduces neutral molecules into a first chamber where a first electron discharge means vibrationally excites the molecules which migrate to a second chamber. In the second chamber a second electron discharge means ionizes the molecules, producing negative ions which are extracted into or by a third chamber. A first magnetic filter prevents high energy electrons from entering the negative ionization chamber from the excitation chamber. A second magnetic filter prevents high energy electrons from entering the extraction chamber from the negative ionizing chamber. An extraction grid at the end of the negative ion vessel attracts negative ions into the third chamber and accelerates them. Another grid, located adjacent to the extraction grid, carries a small positive voltage in order to inhibit positive ions from migrating into the extraction chamber and contour the plasma potential. Additional electrons can be suppressed from the output flux using ExB forces provided by magnetic field means and the extractor grid electric potential.

Electrostatic Plasma Accelerator (EPA)

NASA Technical Reports Server (NTRS)

Brophy, John R.; Aston, Graeme

1989-01-01

The Electrostatic Plasma Accelerator (EPA) is a thruster concept which promises specific impulse levels between low power arcjets and those of the ion engine while retaining the relative simplicity of the arcjet. The EPA thruster produces thrust through the electrostatic acceleration of a moderately dense plasma. No accelerating electrodes are used and the specific impulse is a direct function of the applied discharge voltage and the propellant atomic mass. The goal of the present program is to demonstrate feasibility of the EPA thruster concept through experimental and theoretical investigations of the EPA acceleration mechanism and discharge chamber performance. Experimental investigations will include operating the test bed ion (TBI) engine as an EPA thruster and parametrically varying the thruster geometry and operating conditions to quantify the electrostatic plasma acceleration effect. The theoretical investigations will include the development of a discharge chamber model which describes the relationships between the engine size, plasma properties, and overall performance. For the EPA thruster to be a viable propulsion concept, overall thruster efficiencies approaching 30% with specific impulses approaching 1000 s must be achieved.

Investigation of the AC Plasma Torch Working Conditions for the Plasma Chemical Applications

NASA Astrophysics Data System (ADS)

Safronov, A. A.; Vasilieva, O. B.; Dudnik, J. D.; E Kuznetsov, V.; Shiryaev, V. N.; Subbotin, D. I.; Pavlov, A. V.

2017-04-01

The presented design and parameters of a three-phase AC plasma torch with the power up to 500 kW, flow rate of air 30-50 g/s (temperature up to 5000 K) could be used in different plasma chemical processes. Range of measured plasma temperature is 3500-5000 K. The paper presents investigations of the plasma torch operation modes for its application in plasma chemical technologies. Plasma chemical technologies for various purposes (processing, destruction of various wastes, including technological and hazardous waste, conversion or production of chemicals to obtain nanoscale materials, etc.) are very promising in terms of the process efficiency. Their industrial use is difficult due to the lack of inexpensive and reliable plasma torches providing the desired level of temperature, enthalpy of the working gas and other necessary conditions for the process. This problem can be solved using a considered design of a three-phase alternating current plasma torch with power of 150-500 kW with working gas flow rate of 30-50 g/s with mass average temperature up to 5000K on the basis of which an industrial plasma chemical plant can be created. The basis of the plasma torch operation is a railgun effect that is the principle of arc movement in the field of its own current field. Thanks to single supply of power to the arc, arcs forming in the discharge chamber of the plasma torch move along the electrodes under the action of electrodynamic forces resulting from the interaction of the arc current with its own magnetic field. Under the condition of the three-phase supply voltage, arc transits from the electrode to the electrode with change in the anodic and cathodic phases with frequency of 300 Hz. A special feature of this design is the ability to organize the movement of the arc attachment along the electrode, thus ensuring an even distribution of the thermal load and thus achieve long time of continuous operation of the plasma torch. The parameters of the plasma jet of the plasma torch and the single-phase three-phase plasma injector for use in a plasma-chemical unit for production of nano-dispersed materials are described in the paper.

Apparatus For Metal/Inert-Gas Welding In Vacuum

NASA Technical Reports Server (NTRS)

Stocks, C. O.

1994-01-01

Metal/inert-gas welding-torch assembly operates in vacuum. Plasma generated in interior chamber and focused onto workpiece in vacuum. Pinch rollers feed wire to weld puddle. Controlled flow of plasma reduces dispersal in vacuum, preventing extinction.

Plasma core reactor simulations using RF uranium seeded argon discharges

NASA Technical Reports Server (NTRS)

Roman, W. C.

1975-01-01

An experimental investigation was conducted using the United Technologies Research Center (UTRC) 80 kW and 1.2 MW RF induction heater systems to aid in developing the technology necessary for designing a self-critical fissioning uranium plasma core reactor (PCR). A nonfissioning, steady-state RF-heated argon plasma seeded with pure uranium hexafluoride (UF6) was used. An overall objective was to achieve maximum confinement of uranium vapor within the plasma while simultaneously minimizing the uranium compound wall deposition. Exploratory tests were conducted using the 80 kW RF induction heater with the test chamber at approximately atmospheric pressure and discharge power levels on the order of 10 kW. Four different test chamber flow configurations were tested to permit selection of the configuration offering the best confinement characteristics for subsequent tests at higher pressure and power in the 1.2 MW RF induction heater facility.

Test stand for gas-discharge chamber of TEA CO2 lasers with pulse-periodical energy supply

NASA Astrophysics Data System (ADS)

Shorin, Vladimyr P.; Bystrov, N. D.; Zhuravlyov, O. A.; Nekrasov, V. V.

1997-05-01

Test stand for function optimization (incomposition of gas- dynamic circuit (GDC) of operating characteristics of full- size discharge chamber of flowing TEA carbon-dioxide lasers (power up to 100 kW) was created in Samara State Aerospace University (former Kuibyshev Aviation Institute). Test stand includes an inside-type GDC, low inductive generators of voltage pulses of preionization and main discharges, two-flow rate system of gas supply and noise immunity diagnostic system. Module construction of units of GDC, power supplies of preionization and main discharges allows to change configuration of stand's systems for providing given properties of gas flow and its energy supply. This test stand can also be used in servicing of laser system. The diagnostic system of this stand allows us to analyze energy properties of discharge by means of oscillographic measurements of voltage and current with following processing of discharges' volt- ampere characteristics by means of a computer; rate of non- stationary gas-dynamic disturbances in discharge gap of discharge chamber was measured by means of pulse holographic system (UlG-1M) with data processing of schliren- and interferogram (density fluctuation sensitivity approximately 10-2) and sensor measurement system of gas-dynamic shock and acoustics process with resonance frequency exceeding 100 kHz. Research results of process of plasma plate wave and channel structures interaction with mediums, including actuation non-stationary gas-dynamic flows, cavitation erosion of preionization electrodes' dielectric substructure, ancillary heating of channels by main volumetric discharge are presented as well.

Description of the plasma diagnostics package (PDP) for the OSS-1 Shuttle mission and JSC plasma chamber test in conjunction with the fast pulse electron gun (FPEG)

NASA Technical Reports Server (NTRS)

Shawhan, S. D.

1982-01-01

The objectives, equipment, and techniques for the plasma diagnostics package (PDP) carried by the OSS-1 instrument payload of the STS-4 and scheduled for the Spacelab-2 mission are described. The goals of the first flight were to examine the Orbiter-magnetoplasma interactions by measuring the electric and magnetic field strengths, the ionized particle wakes, and the generated waves. The RMS was employed to lift the unit out of the bay in order to allow characterization of the fields, EM interference, and plasma contamination within 15 m of the Orbiter. The PDP will also be used to examine plasma depletion, chemical reaction rates, waves, and energized plasma produced by firing of the Orbiter thrusters. Operation of the PDP was carried out in the NASA Space Environment Simulation Laboratory test chamber, where the PDP was used to assay the fields, fluxes, wave amplitudes, and particle energy spectra. The PDP instrumentation is also capable of detecting thermal ions, thermal electrons suprathermal particles, VHF/UHF EMI levels, and the S-band field strength.

RF Antenna Design for a Helicon Plasma Source

NASA Astrophysics Data System (ADS)

Godden, Katarina; Stassel, Brendan; Warta, Daniel; Yep, Isaac; Hicks, Nathaniel; Munk, Jens

2017-10-01

A helicon plasma source is under development for the new Plasma Science and Engineering Laboratory at the University of Alaska Anchorage. The helicon source is of a type comprising Pyrex and stainless steel cylindrical sections, joined to an ultrahigh vacuum chamber. A radio frequency (RF) helical antenna surrounds the Pyrex chamber, as well as DC solenoidal magnetic field coils. This presentation focuses on the design of the RF helical antenna and RF matching network, such that helicon wave power is coupled to argon plasma with minimal reflected power to the RF amplifier. The amplifier output is selectable between 2-30 MHz, with forward c.w. power up to 1.5 kW. Details and computer simulation of the antenna geometry, materials, and power matching will be presented, as well as the matching network of RF transmission line, tuning capacitors, and cooling system. An initial computational study of power coupling to the plasma will also be described. Supported by U.S. NSF/DOE Partnership in Basic Plasma Science and Engineering Grant PHY-1619615, by the Alaska Space Grant Program, and by UAA Innovate 2017.

Tokamak DEMO-FNS: Concept of magnet system and vacuum chamber

DOE Office of Scientific and Technical Information (OSTI.GOV)

Azizov, E. A., E-mail: Azizov-EA@nrcki.ru; Ananyev, S. S.; Belyakov, V. A.

The level of knowledge accumulated to date in the physics and technologies of controlled thermonuclear fusion (CTF) makes it possible to begin designing fusion—fission hybrid systems that would involve a fusion neutron source (FNS) and which would admit employment for the production of fissile materials and for the transmutation of spent nuclear fuel. Modern Russian strategies for CTF development plan the construction to 2023 of tokamak-based demonstration hybrid FNS for implementing steady-state plasma burning, testing hybrid blankets, and evolving nuclear technologies. Work on designing the DEMO-FNS facility is still in its infancy. The Efremov Institute began designing its magnet systemmore » and vacuum chamber, while the Kurchatov Institute developed plasma-physics design aspects and determined basic parameters of the facility. The major radius of the plasma in the DEMO-FNS facility is R = 2.75 m, while its minor radius is a = 1 m; the plasma elongation is k{sub 95} = 2. The fusion power is P{sub FUS} = 40 MW. The toroidal magnetic field on the plasma-filament axis is B{sub t0} = 5 T. The plasma current is I{sub p} = 5 MA. The application of superconductors in the magnet system permits drastically reducing the power consumed by its magnets but requires arranging a thick radiation shield between the plasma and magnet system. The central solenoid, toroidal-field coils, and poloidal-field coils are manufactured from, respectively, Nb{sub 3}Sn, NbTi and Nb{sub 3}Sn, and NbTi. The vacuum chamber is a double-wall vessel. The space between the walls manufactured from 316L austenitic steel is filled with an iron—water radiation shield (70% of stainless steel and 30% of water).« less

Studies of Be migration in the JET tokamak using AMS with 10Be marker

NASA Astrophysics Data System (ADS)

Bykov, I.; Bergsåker, H.; Possnert, G.; Zhou, Y.; Heinola, K.; Pettersson, J.; Conroy, S.; Likonen, J.; Petersson, P.; Widdowson, A.

2016-03-01

The JET tokamak is operated with beryllium limiter tiles in the main chamber and tungsten coated carbon fiber composite tiles and solid W tiles in the divertor. One important issue is how wall materials are migrating during plasma operation. To study beryllium redistribution in the main chamber and in the divertor, a 10Be enriched limiter tile was installed prior to plasma operations in 2011-2012. Methods to take surface samples have been developed, an abrasive method for bulk Be tiles in the main chamber, which permits reuse of the tiles, and leaching with hot HCl to remove all Be deposited at W coated surfaces in the divertor. Quantitative analysis of the total amount of Be in cm2 sized samples was made with inductively coupled plasma atomic emission spectroscopy (ICP-AES). The 10Be/9Be ratio in the samples was measured with accelerator mass spectrometry (AMS). The experimental setup and methods are described in detail, including sample preparation, measures to eliminate contributions in AMS from the 10B isobar, possible activation due to plasma generated neutrons and effects of diffusive isotope mixing. For the first time marker concentrations are measured in the divertor deposits. They are in the range 0.4-1.2% of the source concentration, with moderate poloidal variation.

ZnO synthesis by high vacuum plasma-assisted chemical vapor deposition using dimethylzinc and atomic oxygen

NASA Astrophysics Data System (ADS)

Barnes, Teresa M.; Hand, Steve; Leaf, Jackie; Wolden, Colin A.

2004-09-01

Zinc oxide thin films were produced by high vacuum plasma-assisted chemical vapor deposition (HVP-CVD) from dimethylzinc (DMZn) and atomic oxygen. HVP-CVD is differentiated from conventional remote plasma-enhanced CVD in that the operating pressures of the inductively coupled plasma (ICP) source and the deposition chamber are decoupled. Both DMZn and atomic oxygen effuse into the deposition chamber under near collisionless conditions. The deposition rate was measured as a function of DMZn and atomic oxygen flux on glass and silicon substrates. Optical emission spectroscopy and quadrupole mass spectrometry (QMS) were used to provide real time analysis of the ICP source and the deposition chamber. The deposition rate was found to be first order in DMZn pressure and zero order in atomic oxygen density. All films demonstrated excellent transparency and were preferentially orientated along the c-axis. The deposition chemistry occurs exclusively through surface-mediated reactions, since the collisionless transport environment eliminates gas-phase chemistry. QMS analysis revealed that DMZn was almost completely consumed, and desorption of unreacted methyl radicals was greatly accelerated in the presence of atomic oxygen. Negligible zinc was detected in the gas phase, suggesting that Zn was efficiently consumed on the substrate and walls of the reactor.

Effects of discharge chamber length on the negative ion generation in volume-produced negative hydrogen ion source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chung, Kyoung-Jae; Jung, Bong-Ki; An, YoungHwa

2014-02-15

In a volume-produced negative hydrogen ion source, control of electron temperature is essential due to its close correlation with the generation of highly vibrationally excited hydrogen molecules in the heating region as well as the generation of negative hydrogen ions by dissociative attachment in the extraction region. In this study, geometric effects of the cylindrical discharge chamber on negative ion generation via electron temperature changes are investigated in two discharge chambers with different lengths of 7.5 cm and 11 cm. Measurements with a radio-frequency-compensated Langmuir probe show that the electron temperature in the heating region is significantly increased by reducingmore » the length of the discharge chamber due to the reduced effective plasma size. A particle balance model which is modified to consider the effects of discharge chamber configuration on the plasma parameters explains the variation of the electron temperature with the chamber geometry and gas pressure quite well. Accordingly, H{sup −} ion density measurement with laser photo-detachment in the short chamber shows a few times increase compared to the longer one at the same heating power depending on gas pressure. However, the increase drops significantly as operating gas pressure decreases, indicating increased electron temperatures in the extraction region degrade dissociative attachment significantly especially in the low pressure regime. It is concluded that the increase of electron temperature by adjusting the discharge chamber geometry is efficient to increase H{sup −} ion production as long as low electron temperatures are maintained in the extraction region in volume-produced negative hydrogen ion sources.« less

Workplace exposure and release of ultrafine particles during atmospheric plasma spraying in the ceramic industry.

PubMed

Viana, M; Fonseca, A S; Querol, X; López-Lilao, A; Carpio, P; Salmatonidis, A; Monfort, E

2017-12-01

Atmospheric plasma spraying (APS) is a frequently used technique to produce enhanced-property coatings for different materials in the ceramic industry. This work aimed to characterise and quantify the impact of APS on workplace exposure to airborne particles, with a focus on ultrafine particles (UFPs, <100nm) and nanoparticles (<50nm). Particle number, mass concentrations, alveolar lung deposited surface area concentration, and size distributions, in the range 10nm-20μm were simultaneously monitored at the emission source, in the potential worker breathing zone, and in outdoor air. Different input materials (known as feedstock) were tested: (a) micron-sized powders, and (b) suspensions containing submicron- or nano-sized particles. Results evidenced significantly high UFP concentrations (up to 3.3×10 6 /cm 3 ) inside the spraying chamber, which impacted exposure concentrations in the worker area outside the spraying chamber (up to 8.3×10 5 /cm 3 ). Environmental release of UFPs was also detected (3.9×10 5 /cm 3 , outside the exhaust tube). Engineered nanoparticle (ENP) release to workplace air was also evidenced by TEM microscopy. UFP emissions were detected during the application of both micron-sized powder and suspensions containing submicron- or nano-sized particles, thus suggesting that emissions were process- (and not material-) dependent. An effective risk prevention protocol was implemented, which resulted in a reduction of UFP exposure in the worker area. These findings demonstrate the potential risk of occupational exposure to UFPs during atmospheric plasma spraying, and raise the need for further research on UFP formation mechanisms in high-energy industrial processes. Copyright © 2017 The Authors. Published by Elsevier B.V. All rights reserved.

Ion beams extraction and measurements of plasma parameters on a multi-frequencies microwaves large bore ECRIS with permanent magnets

DOE Office of Scientific and Technical Information (OSTI.GOV)

Nozaki, Dai; Kiriyama, Ryutaro; Takenaka, Tomoya

2012-11-06

We have developed an all-permanent magnet large bore electron cyclotron resonance ion source (ECRIS) for broad ion beam processing. The cylindrically comb-shaped magnetic field configuration is adopted for efficient plasma production and good magnetic confinement. To compensate for disadvantages of fixed magnetic configuration, a traveling wave tube amplifier (TWTA) is used. In the comb-shaped ECRIS, it is difficult to achieve controlling ion beam profiles in the whole inside the chamber by using even single frequency-controllable TWTA (11-13GHz), because of large bore size with all-magnets. We have tried controlling profiles of plasma parameters and then those of extracted ion beams bymore » launching two largely different frequencies simultaneously, i.e., multi-frequencies microwaves. Here we report ion beam profiles and corresponding plasma parameters under various experimental conditions, dependence of ion beams against extraction voltages, and influence of different electrode positions on the electron density profile.« less

Plasma research in electric propulsion at Colorado State University

NASA Technical Reports Server (NTRS)

Wilbur, P. J.; Kaufman, H. R.

1976-01-01

The effect of electron bombardment ion thruster magnetic field configurations on the uniformity of the plasma density and the ion beam current density are discussed. The optimum configuration is a right circular cylinder which has significant fields at its outer radii and one end but is nearly field free within the cylinder and at the extraction grid end. The production and loss of the doubly charged ions which effect sputtering damage within thrusters are modeled and the model is verified for the mercury propellant case. Electron bombardment of singly charged ions is found to be the dominant double ion production mechanism. The low density plasma (approx. one million elec/cubic centimeter which exists in the region outside of the beam of thrust producing ions which are drawn from the discharge chamber is discussed. This plasma is modeled by assuming the ions contained in it are generated by a charge exchange process in the ion beam itself. The theoretical predictions of this model are shown to agree with experimental measurements.

Electron temperature profiles in axial field 2.45 GHz ECR ion source with a ceramic chamber

NASA Astrophysics Data System (ADS)

Abe, K.; Tamura, R.; Kasuya, T.; Wada, M.

2017-08-01

An array of electrostatic probes was arranged on the plasma electrode of a 2.45 GHz microwave driven axial magnetic filter field type negative hydrogen (H-) ion source to clarify the spatial plasma distribution near the electrode. The measured spatial distribution of electron temperature indicated the lower temperature near the extraction hole of the plasma electrode corresponding to the effectiveness of the axial magnetic filter field geometry. When the ratio of electron saturation current to the ion saturation current was plotted as a function of position, the obtained distribution showed a higher ratio near the hydrogen gas inlet through which ground state hydrogen molecules are injected into the source. Though the efficiency in producing H- ions is smaller for a 2.45 GHz source than a source operated at 14 GHz, it gives more volume to measure spatial distributions of various plasma parameters to understand fundamental processes that are influential on H- production in this type of ion sources.

Utilization of useless pesticides in a plasma reactor

NASA Astrophysics Data System (ADS)

Lozhechnik, A. V.; Mossé, A. L.; Savchin, V. V.; Skomorokhov, D. S.; Khvedchin, I. V.

2011-09-01

Investigations on destruction of isophene C14H18O7N2 and the butyl ether of 2,4-dichlorophenoxyacetic acid (Cl2C6H3OCH2COOCH2CH(CH3)2) are performed. The plasma treatment of toxic waste is implemented in a plasma reactor with a three-jet mixing chamber. Air is used as the plasma-forming gas.

Magnetron with flux switching cathode and method of operation

DOEpatents

Aaron, D.B.; Wiley, J.D.

1989-09-12

A magnetron sputtering apparatus is formed with a plurality of cells each for generating an independent magnetic field within a different region in the chamber of the apparatus. Each magnetic field aids in maintaining an ion plasma in the respective region of the chamber. One of a plurality of sputtering material targets is positioned on an electrode adjacent to each region so that said ions strike the target ejecting some of the target material. By selectively generating each magnetic field, the ion plasma may be moved from region to region to sputter material from different targets. The sputtered material becomes deposited on a substrate mounted on another electrode within the chamber. The duty cycle of each cell can be dynamically varied during the deposition to produce a layer having a graded composition throughout its thickness. 5 figs.

Magnetron with flux switching cathode and method of operation

DOEpatents

Aaron, David B.; Wiley, John D.

1989-01-01

A magnetron sputtering apparatus is formed with a plurality of cells each for generating an independent magnetic field within a different region in the chamber of the apparatus. Each magnetic field aids in maintaining an ion plasma in the respective region of the chamber. One of a plurality of sputtering material targets is positioned on an electrode adjacent to each region so that said ions strike the target ejecting some of the target material. By selectively generating each magnetic field, the ion plasma may be moved from region to region to sputter material from different targets. The sputtered material becomes deposited on a substrate mounted on another electrode within the chamber. The duty cycle of each cell can be dynamically varied during the deposition to produce a layer having a graded composition throughout its thickness.

Acceleration processes in the quasi-steady magnetoplasmadynamic discharge. Ph.D. Thesis

NASA Technical Reports Server (NTRS)

Boyle, M. J.

1974-01-01

The flow field characteristics within the discharge chamber and exhaust of a quasi-steady magnetoplasmadynamic (MPD) arcjet were examined to clarify the nature of the plasma acceleration process. The observation of discharge characteristics unperturbed by insulator ablation and terminal voltage fluctuations, first requires the satisfaction of three criteria: the use of refractory insulator materials; a mass injection geometry tailored to provide propellant to both electrode regions of the discharge; and a cathode of sufficient surface area to permit nominal MPD arcjet operation for given combinations of arc current and total mass flow. The axial velocity profile and electromagnetic discharge structure were measured for an arcjet configuration which functions nominally at 15.3 kA and 6 g/sec argon mass flow. An empirical two-flow plasma acceleration model is advanced which delineates inner and outer flow regions and accounts for the observed velocity profile and calculated thrust of the accelerator.

Disinfection effect of non-thermal atmospheric pressure plasma for foodborne bacteria

NASA Astrophysics Data System (ADS)

Pervez, Mohammad Rasel; Inomata, Takanori; Ishijima, Tatsuo; Kakikawa, Makiko; Uesugi, Yoshihiko; Tanaka, Yasunori; Yano, Toshihiro; Miwa, Shoji; Noguchi, Akinori

2015-09-01

Non-thermal atmospheric pressure plasma (NAPP) exposure can be a suitable alternative for bacteria inactivation in food processing industry. Specimen placed in the enclosure are exposed to various reactive radicals produced within the discharge chamber. It is also exposed to the periodic variation of the electric field strength in the chamber. Dielectric barrier discharge is produced by high voltage pulse (Vpp = 18 kV, pulse width 20 μs, repetition frequency 10 kHz) in a polypropylene box (volume = 350 cm3) using helium as main feed gas. Inactivation efficiency of NAPP depends on the duration of NAPP exposure, applied voltage pulse strength and type, pulse duration, electrode separation and feed gas composition. In this study we have investigated inactivation of Bacillus lichenformis spore as an example of food borne bacteria. Keeping applied voltage, electrode configuration and total gas flow rate constant, spores are exposed to direct NAPP for different time duration while O2 concentration in the feed gas composition is varied. 10 minutes NAPP exposure resulted in ~ 3 log reduction of Bacillus lichenformis spores for 1% O2concentration (initial concentration ~ 106 / specimen). This work is supported by research and development promotion grant provided by the Hokuriku Industrial Advancement Center.

SOME NEW DATA ON SELF-COMPRESSED DISCHARGES (in Russian)

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kvartskhava, I.F.; Kervalidze, K.N.; Gvaladze, Yu.C.

1962-01-01

The theory of self-constricted discharges, which predicts the possibiiity of the appearance of various types of instabilities, does not reflect fully the multiple phenoniena which are experimentally observed. The models used in the theory evidentiy do not consider the presence of some processes in self- constricted discharges which materially determine the real behavior of the plasma. The experiments showed a number of such processes. Basically, they consist of an unequal heating of the discharge near the walls of the chamber. Thereby the discharge currents fiow along distorted threadlike channels which, in theta - pinches mostly follow either the z-direction ormore » the theta -direction, and in z- pinches they basically follow the theta -direction. In the process of plasma compression the above mentioned thread formations experience unequal accelerations. Having a high conductivity, these formations facilitate the capture of magnetic fieids which obstructs the thermaiization of the kinetic energy of the plasma's radial motion. As a result of this process the plasma is far from thermial equilibrium when in the stage of maximum compression. It is encompassed by a motion of turbulent character. After the maximum compression of the plasma, various kinds of plasma formation are ejected from the surface of the pinch. The magnetic field is more effectively trapped than in zpinches. Consequently, a greater variety of types of instability is observed in theta - pinches than in z-pinches. Highspeed photography of the discharge turned out to be the most practical and fruitful method of studying the processes of formation and the subsequent motion of the plasma. Photographs of the discharges obtained by streak photography and by framing camera are discussed. The results of probe measurements of magnetic and electric fields as well as the results of measurements of currents by means of Rogovsky belts are given. (auth)« less

Understanding the growth of micro and nano-crystalline AlN by thermal plasma process

NASA Astrophysics Data System (ADS)

Kanhe, Nilesh S.; Nawale, Ashok B.; Gawade, Rupesh L.; Puranik, Vedavati G.; Bhoraskar, Sudha V.; Das, Asoka K.; Mathe, Vikas L.

2012-01-01

We report the studies related to the growth of crystalline AlN in a DC thermal plasma reactor, operated by a transferred arc plasma torch. The reactor is capable of producing the nanoparticles of Al and AlN depending on the composition of the reacting gas. Al and AlN micro crystals are formed at the anode placed on the graphite and nano crystalline Al and AlN gets deposited on the inner surface of the plasma reactor. X-ray diffraction, Raman spectroscopy analysis, single crystal X-ray diffraction and TGA-DTA techniques are used to infer the purity of post process crystals as a hexagonal AlN. The average particle size using SEM was found to be around 30 μm. The morphology of nanoparticles of Al and AlN, nucleated by gas phase condensation in a homogeneous medium were studied by transmission electron microscopy analysis. The particle ranged in size between 15 and 80 nm in diameter. The possible growth mechanism of crystalline AlN at the anode has been explained on the basis of non-equilibrium processes in the core of the plasma and steep temperature gradient near its periphery. The gas phase species of AlN and various constituent were computed using Murphy code based on minimization of free energy. The process provides 50% yield of microcrystalline AlN and remaining of Al at anode and that of nanocrystalline h-AlN and c-Al collected from the walls of the chamber is about 33% and 67%, respectively.

Phosphorus-doped glass proton exchange membranes for low temperature direct methanol fuel cells

NASA Astrophysics Data System (ADS)

Prakash, Shruti; Mustain, William E.; Park, SeongHo; Kohl, Paul A.

Phosphorus-doped silicon dioxide thin films were used as ion exchange membranes in low temperature proton exchange membrane fuel cells. Phosphorus-doped silicon dioxide glass (PSG) was deposited via plasma-enhanced chemical vapor deposition (PECVD). The plasma deposition of PSG films allows for low temperature fabrication that is compatible with current microelectronic industrial processing. SiH 4, PH 3 and N 2O were used as the reactant gases. The effect of plasma deposition parameters, substrate temperature, RF power, and chamber pressure, on the ionic conductivity of the PSG films is elucidated. PSG conductivities as high as 2.54 × 10 -4 S cm -1 were realized, which is 250 times higher than the conductivity of pure SiO 2 films (1 × 10 -6 S cm -1) under identical deposition conditions. The higher conductivity films were deposited at low temperature, moderate pressure, limited reactant gas flow rate, and high RF power.

Methods of analysis by the U.S. Geological Survey National Water Quality Laboratory; use of a modified ultrasonic nebulizer for the analysis of low ionic-strength water by inductively coupled optical emission spectrometry

USGS Publications Warehouse

Harris, Carl M.; Litteral, Charles J.; Damrau, Donna L.

1997-01-01

The U.S. Geological Survey National Water Quality Laboratory has developed a method for the determination of dissolved calcium, iron, magnesium, manganese, silica, and sodium using a modified ultrasonic nebulizer sample-introduction system to an inductively coupled plasma-optical emission spectrometer. The nebulizer's spray chamber has been modified to avoid carryover and memory effects common in some conventional ultrasonic designs. The modified ultrasonic nebulizer is equipped with a high-speed rinse cycle to remove previously analyzed samples from the spray chamber without excessive flush times. This new rinse cycle decreases sample washout times by reducing carryover and memory effects from salt or analytes in previously analyzed samples by as much as 45 percent. Plasma instability has been reduced by repositioning the argon carrier gas inlet on the spray chamber and by directly pumping waste from the chamber, instead of from open drain traps, thereby maintaining constant pressure to the plasma. The ultrasonic nebulizer improves signal intensities, which are 8 to 16 times greater than for a conventional cross-flow pneumatic nebulizer, without being sensitive to clogging from salt buildup as in cross-flow nebulizers. Detection limits for the ultrasonic nebulizer are 4 to 18 times less than detection limits achievable using a cross-flow pneumatic nebulizer, with equivalent sample analysis time.

Conference on Real-Time Computer Applications in Nuclear, Particle and Plasma Physics, 6th, Williamsburg, VA, May 15-19, 1989, Proceedings

NASA Technical Reports Server (NTRS)

Pordes, Ruth (Editor)

1989-01-01

Papers on real-time computer applications in nuclear, particle, and plasma physics are presented, covering topics such as expert systems tactics in testing FASTBUS segment interconnect modules, trigger control in a high energy physcis experiment, the FASTBUS read-out system for the Aleph time projection chamber, a multiprocessor data acquisition systems, DAQ software architecture for Aleph, a VME multiprocessor system for plasma control at the JT-60 upgrade, and a multiasking, multisinked, multiprocessor data acquisition front end. Other topics include real-time data reduction using a microVAX processor, a transputer based coprocessor for VEDAS, simulation of a macropipelined multi-CPU event processor for use in FASTBUS, a distributed VME control system for the LISA superconducting Linac, a distributed system for laboratory process automation, and a distributed system for laboratory process automation. Additional topics include a structure macro assembler for the event handler, a data acquisition and control system for Thomson scattering on ATF, remote procedure execution software for distributed systems, and a PC-based graphic display real-time particle beam uniformity.

Multiprobe characterization of plasma flows for space propulsion

NASA Astrophysics Data System (ADS)

Damba, Julius; Argente, P.; Maldonado, P. E.; Cervone, A.; Domenech-Garret, J. L.; Conde, L.

2018-02-01

Plasma engines for space propulsion generate plasma jets (also denominated plasma plumes) having supersonic ion groups with typical speeds in the order of tens of kilometers per second, which lies between electron and ion thermal speeds. Studies of the stationary plasma expansion process using a four-grid retarding field energy analyzer (RFEA), an emissive probe (EP) and a Langmuir probe (LP), all mounted on a three dimensionally (3D) displaced multiprobe structure are discussed. Specifically, the determination of plasma beam properties from the RFEA current-voltage (IV) characteristic curves is presented. The experimental results show the ion energy spectra to be essentially unchanged over 300 mm along the plasma-jet expansion axis of symmetry. The measured ion velocity distribution function (IVDF) results from the superposition of different ion groups and has two dominant populations: A low-energy group constituted of ions from the background plasma is produced by the interaction of the plasma jet with the walls of the vacuum chamber. The fast-ion population is composed of ions from the plasma beam moving at supersonic speeds with respect to the low-energy ions. The decreasing spatial profiles of the plasma-jet current density are compared with those of the low-energy ion group, which are not uniform along the axis of symmetry because of the small contributions from other ion populations with intermediate speeds.

The component content of active particles in a plasma-chemical reactor based on volume barrier discharge

NASA Astrophysics Data System (ADS)

Soloshenko, I. A.; Tsiolko, V. V.; Pogulay, S. S.; Terent'yeva, A. G.; Bazhenov, V. Yu; Shchedrin, A. I.; Ryabtsev, A. V.; Kuzmichev, A. I.

2007-02-01

In this paper the results of theoretical and experimental studies of the component content of active particles formed in a plasma-chemical reactor composed of a multiple-cell generator of active particles, based on volume barrier discharge, and a working chamber are presented. For calculation of the content of uncharged plasma components an approach is proposed which is based on averaging of the power introduced over the entire volume. Advantages of such an approach lie in an absence of fitting parameters, such as the dimensions of microdischarges, their surface density and rate of breakdown. The calculation and the experiment were accomplished with the use of dry air (20% relative humidity) as the plasma generating medium. Concentrations of O3, HNO3, HNO2, N2 O5 and NO3 were measured experimentally in the discharge volume and working chamber for the residence time of particles on a discharge of 0.3 s and more and discharge specific power of 1.5 W cm-3. It has been determined that the best agreement between the calculation and the experiment occurs at calculated gas medium temperatures in the discharge plasma of about 400-425 K, which correspond to the experimentally measured rotational temperature of nitrogen. In most cases the calculated concentrations of O3, HNO3, HNO2, N2O5 and NO3 for the barrier discharge and the working chamber are in fairly good agreement with the respective measured values.

Laboratory plasma with cold electron temperature of the lower ionosphere

NASA Astrophysics Data System (ADS)

Dickson, Shannon; Robertson, Scott

2009-10-01

For the first time, plasma with cold electron temperatures less than 300K has been created continuously in the laboratory. The plasma is created in a cylindrical double-walled vacuum chamber in which the inner chamber (18cm in diameter and 30cm long) is wrapped in copper tubing through which vapor from liquid nitrogen flows, providing a cooling mechanism for the neutral gas. The inner chamber has two negatively-biased filaments for plasma generation and a platinum wire Langmuir probe for diagnostic measurements. Neutral gas pressures of 1.6mTorr and a total filament emission current of 2mA are used to obtain plasma densities near 4 x 10^8 cm-3. When carbon monoxide is used as the working gas, decreasing the neutral gas temperature also decreases the cold electron temperatures, yielding cold electrons with 21meV (240K) when the neutral CO is at 150K. The same experiment conducted with H2, He, or Ar results in a doubling of the cold electron temperatures, yielding 80meV (930K) when the neutral gas is at 150K. The lower electron temperature with CO is attributed to the asymmetric CO molecule having a nonzero electric dipole moment which increases the cross section for electron energy exchange. Nitric oxide, a dominant constituent of the ionosphere, has a similar dipole moment and collision cross section as carbon monoxide and is likely to be equally effective at cooling electrons.

Method of plasma enhanced chemical vapor deposition of diamond using methanol-based solutions

NASA Technical Reports Server (NTRS)

Tzeng, Yonhua (Inventor)

2009-01-01

Briefly described, methods of forming diamond are described. A representative method, among others, includes: providing a substrate in a reaction chamber in a non-magnetic-field microwave plasma system; introducing, in the absence of a gas stream, a liquid precursor substantially free of water and containing methanol and at least one carbon and oxygen containing compound having a carbon to oxygen ratio greater than one, into an inlet of the reaction chamber; vaporizing the liquid precursor; and subjecting the vaporized precursor, in the absence of a carrier gas and in the absence in a reactive gas, to a plasma under conditions effective to disassociate the vaporized precursor and promote diamond growth on the substrate in a pressure range from about 70 to 130 Torr.

Levitation and collection of diamond fine particles in the rf plasma chamber equipped with a hot filament

DOE Office of Scientific and Technical Information (OSTI.GOV)

Shimizu, S.; Shimizu, T.; Thomas, H. M.

2011-11-15

We demonstrate the levitation of diamond fine particles in a H{sub 2} rf plasma chamber equipped with a hot filament and heated electrodes. The levitation conditions should be carefully chosen to compensate the strong thermophoretic forces caused by the filament and the electrodes. This levitation technique with the existence of a hot filament can be applied, e.g., for the efficient growth of diamond layers on seed particles injected and levitated in an rf plasma with reactive gases, e.g., CH{sub 4}/H{sub 2}. Additionally, the method for direct capture of levitated particles on a planar substrate was established, which is useful ifmore » it is necessary to analyze the particles after the levitation.« less

15 cm mercury multipole thruster

NASA Technical Reports Server (NTRS)

Longhurst, G. R.; Wilbur, P. J.

1978-01-01

A 15 cm multipole ion thruster was adapted for use with mercury propellant. During the optimization process three separable functions of magnetic fields within the discharge chamber were identified: (1) they define the region where the bulk of ionization takes place, (2) they influence the magnitudes and gradients in plasma properties in this region, and (3) they control impedance between the cathode and main discharge plasmas in hollow cathode thrusters. The mechanisms for these functions are discussed. Data from SERT II and cusped magnetic field thrusters are compared with those measured in the multipole thruster. The performance of this thruster is shown to be similar to that of the other two thrusters. Means of achieving further improvement in the performance of the multipole thruster are suggested.

Hot-filament chemical vapor deposition chamber and process with multiple gas inlets

DOEpatents

Deng, Xunming; Povolny, Henry S.

2004-06-29

A thin film deposition method uses a vacuum confinement cup that employs a dense hot filament and multiple gas inlets. At least one reactant gas is introduced into the confinement cup both near and spaced apart from the heated filament. An electrode inside the confinement cup is used to generate plasma for film deposition. The method is used to deposit advanced thin films (such as silicon based thin films) at a high quality and at a high deposition rate.

Irregular-regular mode oscillations inside plasma bubble and its fractal analysis in glow discharge magnetized plasma

NASA Astrophysics Data System (ADS)

Megalingam, Mariammal; Hari Prakash, N.; Solomon, Infant; Sarma, Arun; Sarma, Bornali

2017-04-01

Experimental evidence of different kinds of oscillations in floating potential fluctuations of glow discharge magnetized plasma is being reported. A spherical gridded cage is inserted into the ambient plasma volume for creating plasma bubbles. Plasma is produced between a spherical mesh grid and chamber. The spherical mesh grid of 80% optical transparency is connected to the positive terminal of power supply and considered as anode. Two Langmuir probes are kept in the ambient plasma to measure the floating potential fluctuations in different positions within the system, viz., inside and outside the spherical mesh grid. At certain conditions of discharge voltage (Vd) and magnetic field, irregular to regular mode appears, and it shows chronological changes with respect to magnetic field. Further various nonlinear analyses such as Recurrence Plot, Hurst exponent, and Lyapunov exponent have been carried out to investigate the dynamics of oscillation at a range of discharge voltages and external magnetic fields. Determinism, entropy, and Lmax are important measures of Recurrence Quantification Analysis which indicate an irregular to regular transition in the dynamics of the fluctuations. Furthermore, behavior of the plasma oscillation is characterized by the technique called multifractal detrended fluctuation analysis to explore the nature of the fluctuations. It reveals that it has a multifractal nature and behaves as a long range correlated process.

Novel single-cell mega-size chambers for electrochemical etching of panorama position-sensitive polycarbonate ion image detectors

NASA Astrophysics Data System (ADS)

Sohrabi, Mehdi

2017-11-01

A novel development is made here by inventing panorama single-cell mega-size electrochemical etching (MS-ECE) chamber systems for processing panorama position-sensitive mega-size polycarbonate ion image detectors (MS-PCIDs) of potential for many neutron and ion detection applications in particular hydrogen ions or proton tracks and images detected for the first time in polycarbonates in this study. The MS-PCID is simply a large polycarbonate sheet of a desired size. The single-cell MS-ECE invented consists of two large equally sized transparent Plexiglas sheets as chamber walls holding a MS-PCID and the ECE chamber components tightly together. One wall has a large flat stainless steel electrode (dry cell) attached to it which is directly in contact with the MS-PCID and the other wall has a rod electrode with two holes to facilitate feeding and draining out the etching solution from the wet cell. A silicon rubber washer plays the role of the wet cell to hold the etchant and the electrical insulator to isolate the dry cell from the wet cell. A simple 50 Hz-HV home-made generator provides an adequate field strength through the two electrodes across the MS-ECE chamber. Two panorama single-cell MS-ECE chamber systems (circular and rectangular shapes) constructed were efficiently applied to processing the MS-PCIDs for 4π ion emission image detection of different gases in particular hydrogen ions or protons in a 3.5 kJ plasma focus device (PFD as uniquely observed by the unaided eyes). The panorama MS-PCID/MS-ECE image detection systems invented are novel with high potential for many applications in particular as applied to 4π panorama ion emission angular distribution image detection studies in PFD space, some results of which are presented and discussed.

Novel single-cell mega-size chambers for electrochemical etching of panorama position-sensitive polycarbonate ion image detectors.

PubMed

Sohrabi, Mehdi

2017-11-01

A novel development is made here by inventing panorama single-cell mega-size electrochemical etching (MS-ECE) chamber systems for processing panorama position-sensitive mega-size polycarbonate ion image detectors (MS-PCIDs) of potential for many neutron and ion detection applications in particular hydrogen ions or proton tracks and images detected for the first time in polycarbonates in this study. The MS-PCID is simply a large polycarbonate sheet of a desired size. The single-cell MS-ECE invented consists of two large equally sized transparent Plexiglas sheets as chamber walls holding a MS-PCID and the ECE chamber components tightly together. One wall has a large flat stainless steel electrode (dry cell) attached to it which is directly in contact with the MS-PCID and the other wall has a rod electrode with two holes to facilitate feeding and draining out the etching solution from the wet cell. A silicon rubber washer plays the role of the wet cell to hold the etchant and the electrical insulator to isolate the dry cell from the wet cell. A simple 50 Hz-HV home-made generator provides an adequate field strength through the two electrodes across the MS-ECE chamber. Two panorama single-cell MS-ECE chamber systems (circular and rectangular shapes) constructed were efficiently applied to processing the MS-PCIDs for 4π ion emission image detection of different gases in particular hydrogen ions or protons in a 3.5 kJ plasma focus device (PFD as uniquely observed by the unaided eyes). The panorama MS-PCID/MS-ECE image detection systems invented are novel with high potential for many applications in particular as applied to 4π panorama ion emission angular distribution image detection studies in PFD space, some results of which are presented and discussed.

High current ion source

DOEpatents

Brown, Ian G.; MacGill, Robert A.; Galvin, James E.

1990-01-01

An ion source utilizing a cathode and anode for producing an electric arc therebetween. The arc is sufficient to vaporize a portion of the cathode to form a plasma. The plasma leaves the generation region and expands through another regon. The density profile of the plasma may be flattened using a magnetic field formed within a vacuum chamber. Ions are extracted from the plasma to produce a high current broad on beam.

Characteristics of Surface Sterilization using ECR Plasma

NASA Astrophysics Data System (ADS)

Yonesu, Akira; Hara, Kazufumi; Nishikawa, Tatsuya; Hayashi, Nobuya

2015-09-01

Plasma sterilization techniques have superior characteristics such as a short treatment times, non-toxicity and low thermal damages on the sterilized materials. In plasma sterilization, microorganisms can be sterilized by active radicals, energetic charged particles, and vacuum UV radiation. The influence of each factor depends on the plasma operating parameters. Microwave discharges under the electron cyclotron resonance (ECR) condition produce higher electron temperature and density plasma as compared with other plasma generation techniques. In the present study, characteristics of surface sterilization using ECR plasma have been investigated.The experiment was performed in the vacuum chamber which contains a magnet holder. A pair of rectangular Sm-Co permanent magnets is aligned parallel to each other within the magnet holder. The region of the magnetic field for ECR exists near the magnet holder surface. When the microwave is introduced into the vacuum chamber, a ECR plasma is produced around surface of the magnet holder. High energy electrons and oxygen radicals were observed at ECR zone by electric probe method and optical spectroscopic method. Biological indicators (B.I.) having spore of 106 was sterilized in 2min for oxygen discharge. The temperature of the B.I. installation position was about 55°. The sterilization was achieved by the effect of oxygen radicals and high energy electrons.

Helium retention and Hydrogen absorption in FLiRE

NASA Astrophysics Data System (ADS)

Schultz, Benjamin

2005-10-01

The FLiRE (Flowing Lithium Retention Experiment) facility consists of a flow loop which contains a two sections to observe flow along ramps in an upper chamber. As the Li exits the upper chamber it makes a vacuum seal isolation of the upper chamber from a lower one where thermal desporption spectroscopy can take place. By applying an ion beam or a plasma pulse to the open-channel Li flow on the ramp, studies can be made of He and H retention by measuring the partial pressure of He in the lower TDS chamber. Previous studies have shown about a 1% to 2% retention of He over a time scale sufficient to exit a potential flowing Li-walled reactor. The significance of such a result is very high and needs to be verified. It is possible that He implanted in the ramp before flow was initiated was absorbed leading to the observed increase. The experiment has been altered to address this and other concerns. Research on hydrogen absorption in liquid lithium exposed to hydrogen plasma has also been conducted. Overall results and their implications towards large scale fusion reactors are given.

Osmotic Water Permeability of Isolated Protoplasts. Modifications during Development1

PubMed Central

Ramahaleo, Tiana; Morillon, Raphaël; Alexandre, Joël; Lassalles, Jean-Paul

1999-01-01

A transference chamber was developed to measure the osmotic water permeability coefficient (Pos) in protoplasts 40 to 120 μm in diameter. The protoplast was held by a micropipette and submitted to a steep osmotic gradient created in the transference chamber. Pos was derived from the changes in protoplast dimensions, as measured using a light microscope. Permeabilities were in the range 1 to 1000 μm s−1 for the various types of protoplasts tested. The precision for Pos was ≤40%, and within this limit, no asymmetry in the water fluxes was observed. Measurements on protoplasts isolated from 2- to 5-d-old roots revealed a dramatic increase in Pos during root development. A shift in Pos from 10 to 500 μm s−1 occurred within less than 48 h. This phenomenon was found in maize (Zea mays), wheat (Triticum aestivum), and rape (Brassica napus) roots. These results show that early developmental processes modify water-transport properties of the plasma membrane, and that the transference chamber is adapted to the study of water-transport mechanisms in native membranes. PMID:10069827

Rocket thrust chamber thermal barrier coatings

NASA Technical Reports Server (NTRS)

Quentmeyer, R. J.

1985-01-01

Subscale rocket thrust chamber tests were conducted to evaluate the effectiveness and durability of thin yttria stabilized zirconium oxide coatings applied to the thrust chamber hot-gas side wall. The fabrication consisted of arc plasma spraying the ceramic coating and bond coat onto a mandrell and then electrodepositing the copper thrust chamber wall around the coating. Chambers were fabricated with coatings .008, and .005 and .003 inches thick. The chambers were thermally cycled at a chamber pressure of 600 psia using oxygen-hydrogen as propellants and liquid hydrogen as the coolant. The thicker coatings tended to delaminate, early in the cyclic testing, down to a uniform sublayer which remained well adhered during the remaining cycles. Two chambers with .003 inch coatings were subjected to 1500 thermal cycles with no coating loss in the throat region, which represents a tenfold increase in life over identical chambers having no coatings. An analysis is presented which shows that the heat lost to the coolant due to the coating, in a rocket thrust chamber design having a coating only in the throat region, can be recovered by adding only one inch to the combustion chamber length.

Spectral variation of high power microwave pulse propagating in a self-generated plasma

NASA Technical Reports Server (NTRS)

Ren, A.; Kuo, S. P.; Kossey, Paul

1995-01-01

A systematic study to understand the spectral variation of a high power microwave pulse propagating in a self-generated plasma is carried out. It includes the theoretical formulation, experimental demonstration, and computer simulations and computer experiments. The experiment of pulse propagation is conducted in a vacuum chamber filled with dry air (approximately 0.2 torr); the chamber is made of a 2 ft. cube of Plexiglas. A rectangular microwave pulse (1 microsec pulse width and 3.27 GHz carrier frequency) is fed into the cube through an S band microwave horn placed at one side of the chamber. A second S-band horn placed at the opposite side of the chamber is used to receive the transmitted pulse. The spectra of the incident pulse and transmitted pulse are then compared. As the power of the incident pulse is only slightly (less than 15%) above the breakdown threshold power of the background air, the peak of the spectrum of the transmitted pulse is upshifted from the carrier frequency 3.27 GHz of the incident pulse. However, as the power of the incident pulse exceeds the breakdown threshold power of the background air by 30%, a different phenomenon appears. The spectrum of the transmitted pulse begins to have two peaks. One is upshifted and the other one downshifted from the single peak location of the incident pulse. The amount of frequency downshift is comparable to that of the upshifted frequency. A theoretical model describing the experiment of pulse propagation in a self-generated plasma is developed. There are excellent agreements between the experimental results and computer simulations based on this theoretical model, which is also used to further carry out computer experiments identifying the role of plasma introduced wave loss on the result of frequency downshift phenomenon.

Improved Method of Purifying Carbon Nanotubes

NASA Technical Reports Server (NTRS)

Delzeit, Lance D.

2004-01-01

An improved method of removing the residues of fabrication from carbon nanotubes has been invented. These residues comprise amorphous carbon and metal particles that are produced during the growth process. Prior methods of removing the residues include a variety of processes that involved the use of halogens, oxygen, or air in both thermal and plasma processes. Each of the prior methods entails one or more disadvantages, including non-selectivity (removal or damage of nanotubes in addition to removal of the residues), the need to dispose of toxic wastes, and/or processing times as long as 24 hours or more. In contrast, the process described here does not include the use of toxic chemicals, the generation of toxic wastes, causes little or no damage to the carbon nanotubes, and involves processing times of less than 1 hour. In the improved method, purification is accomplished by flowing water vapor through the reaction chamber at elevated temperatures and ambient pressures. The impurities are converted to gaseous waste products by the selective hydrogenation and hydroxylation by the water in a reaction chamber. This process could be performed either immediately after growth or in a post-growth purification process. The water used needs to be substantially free of oxygen and can be obtained by a repeated freeze-pump-thaw process. The presence of oxygen will non-selectively attach the carbon nanotubes in addition to the amorphous carbon.

Optimization of a RF-generated CF4/O2 gas plasma sterilization process.

PubMed

Lassen, Klaus S; Nordby, Bolette; Grün, Reinar

2003-05-15

A sterilization process with the use of RF-generated (13.56 MHz) CF(4)/O(2) gas plasma was optimized in regards to power, flow rate, exposure time, and RF-system type. The dependency of the sporicidal effect on the spore inoculum positioning in the chamber of the RF systems was also investigated. Dried Bacillus stearothermophilus ATCC 7953 endospores were used as test organisms. The treatments were evaluated on the basis of survival curves and corresponding D values. The only parameter found to affect the sterilization process was the power of the RF system. Higher power resulted in higher kill. Finally, when the samples were placed more than 3-8 cm away from a centrally placed electrode in System 2, the sporicidal effect was reduced. The results are discussed and compared to results from the present literature. The RF excitation source is evaluated to be more appropriate for sterilization processes than the MW source. Copyright 2003 Wiley Periodicals, Inc. J Biomed Mater Res Part B: Appl Biomater 65B: 239-244, 2003

Computational Model Tracking Primary Electrons, Secondary Electrons, and Ions in the Discharge Chamber of an Ion Engine

NASA Technical Reports Server (NTRS)

Mahalingam, Sudhakar; Menart, James A.

2005-01-01

Computational modeling of the plasma located in the discharge chamber of an ion engine is an important activity so that the development and design of the next generation of ion engines may be enhanced. In this work a computational tool called XOOPIC is used to model the primary electrons, secondary electrons, and ions inside the discharge chamber. The details of this computational tool are discussed in this paper. Preliminary results from XOOPIC are presented. The results presented include particle number density distributions for the primary electrons, the secondary electrons, and the ions. In addition the total number of a particular particle in the discharge chamber as a function of time, electric potential maps and magnetic field maps are presented. A primary electron number density plot from PRIMA is given in this paper so that the results of XOOPIC can be compared to it. PRIMA is a computer code that the present investigators have used in much of their previous work that provides results that compare well to experimental results. PRIMA only models the primary electrons in the discharge chamber. Modeling ions and secondary electrons, as well as the primary electrons, will greatly increase our ability to predict different characteristics of the plasma discharge used in an ion engine.

An amplitude modulated radio frequency plasma generator

NASA Astrophysics Data System (ADS)

Lei, Fan; Li, Xiaoping; Liu, Yanming; Liu, Donglin; Yang, Min; Xie, Kai; Yao, Bo

2017-04-01

A glow discharge plasma generator and diagnostic system has been developed to study the effects of rapidly variable plasmas on electromagnetic wave propagation, mimicking the plasma sheath conditions encountered in space vehicle reentry. The plasma chamber is 400 mm in diameter and 240 mm in length, with a 300-mm-diameter unobstructed clear aperture. Electron densities produced are in the mid 1010 electrons/cm3. An 800 W radio frequency (RF) generator is capacitively coupled through an RF matcher to an internally cooled stainless steel electrode to form the plasma. The RF power is amplitude modulated by a waveform generator that operates at different frequencies. The resulting plasma contains electron density modulations caused by the varying power levels. A 10 GHz microwave horn antenna pair situated on opposite sides of the chamber serves as the source and detector of probe radiation. The microwave power feed to the source horn is split and one portion is sent directly to a high-speed recording oscilloscope. On mixing this with the signal from the pickup horn antenna, the plasma-induced phase shift between the two signals gives the path-integrated electron density with its complete time dependent variation. Care is taken to avoid microwave reflections and extensive shielding is in place to minimize electronic pickup. Data clearly show the low frequency modulation of the electron density as well as higher harmonics and plasma fluctuations.

Measurements of line-averaged electron density of pulsed plasmas using a He-Ne laser interferometer in a magnetized coaxial plasma gun device

NASA Astrophysics Data System (ADS)

Iwamoto, D.; Sakuma, I.; Kitagawa, Y.; Kikuchi, Y.; Fukumoto, N.; Nagata, M.

2012-10-01

In next step of fusion devices such as ITER, lifetime of plasma-facing materials (PFMs) is strongly affected by transient heat and particle loads during type I edge localized modes (ELMs) and disruption. To clarify damage characteristics of the PFMs, transient heat and particle loads have been simulated by using a plasma gun device. We have performed simulation experiments by using a magnetized coaxial plasma gun (MCPG) device at University of Hyogo. The line-averaged electron density measured by a He-Ne interferometer is 2x10^21 m-3 in a drift tube. The plasma velocity measured by a time of flight technique and ion Doppler spectrometer was 70 km/s, corresponding to the ion energy of 100 eV for helium. Thus, the ion flux density is 1.4x10^26 m-2s-1. On the other hand, the MCPG is connected to a target chamber for material irradiation experiments. It is important to measure plasma parameters in front of target materials in the target chamber. In particular, a vapor cloud layer in front of the target material produced by the pulsed plasma irradiation has to be characterized in order to understand surface damage of PFMs under ELM-like plasma bombardment. In the conference, preliminary results of application of the He-Ne laser interferometer for the above experiment will be shown.

Development of GEM detector for plasma diagnostics application: simulations addressing optimization of its performance

NASA Astrophysics Data System (ADS)

Chernyshova, M.; Malinowski, K.; Kowalska-Strzęciwilk, E.; Czarski, T.; Linczuk, P.; Wojeński, A.; Krawczyk, R. D.

2017-12-01

The advanced Soft X-ray (SXR) diagnostics setup devoted to studies of the SXR plasma emissivity is at the moment a highly relevant and important for ITER/DEMO application. Especially focusing on the energy range of tungsten emission lines, as plasma contamination by W and its transport in the plasma must be understood and monitored for W plasma-facing material. The Gas Electron Multiplier, with a spatial and energy-resolved photon detecting chamber, based SXR radiation detection system under development by our group may become such a diagnostic setup considering and solving many physical, technical and technological aspects. This work presents the results of simulations aimed to optimize a design of the detector's internal chamber and its performance. The study of the effect of electrodes alignment allowed choosing the gap distances which maximizes electron transmission and choosing the optimal magnitudes of the applied electric fields. Finally, the optimal readout structure design was identified suitable to collect a total formed charge effectively, basing on the range of the simulated electron cloud at the readout plane which was in the order of ~ 2 mm.

Performance of a permanent-magnet helicon source at 27 and 13 MHz

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chen, Francis F.

2012-09-15

A small helicon source is used to create dense plasma and inject it into a large chamber. A permanent magnet is used for the dc magnetic field (B-field), making the system very simple and compact. Though theory predicts that better antenna coupling will occur at 27.12 MHz, it was found that 13.56 MHz surprisingly gives even higher density due to practical effects not included in theory. Complete density n and electron temperature T{sub e} profiles are measured at three distances below the source. The plasma inside the source is also measured with a special probe, even under the antenna. Themore » density there is lower than expected because the plasma created is immediately ejected, filling the experimental chamber. The advantage of helicons over inductively coupled plasmas (with no B-field) increases with RF power. At high B-fields, edge ionization by the Trivelpiece-Gould mode can be seen. These results are useful for design of multiple-tube, large-area helicon sources for plasma etching and deposition because problems are encountered which cannot be foreseen by theory alone.« less

EUV laser produced and induced plasmas for nanolithography

NASA Astrophysics Data System (ADS)

Sizyuk, Tatyana; Hassanein, Ahmed

2017-10-01

EUV produced plasma sources are being extensively studied for the development of new technology for computer chips production. Challenging tasks include optimization of EUV source efficiency, producing powerful source in 2 percentage bandwidth around 13.5 nm for high volume manufacture (HVM), and increasing the lifetime of collecting optics. Mass-limited targets, such as small droplet, allow to reduce contamination of chamber environment and mirror surface damage. However, reducing droplet size limits EUV power output. Our analysis showed the requirement for the target parameters and chamber conditions to achieve 500 W EUV output for HVM. The HEIGHTS package was used for the simulations of laser produced plasma evolution starting from laser interaction with solid target, development and expansion of vapor/plasma plume with accurate optical data calculation, especially in narrow EUV region. Detailed 3D modeling of mix environment including evolution and interplay of plasma produced by lasers from Sn target and plasma produced by in-band and out-of-band EUV radiation in ambient gas, used for the collecting optics protection and cleaning, allowed predicting conditions in entire LPP system. Effect of these conditions on EUV photon absorption and collection was analyzed. This work is supported by the National Science Foundation, PIRE project.

[Spectroscopic diagnostics of DC argon plasma at atmospheric pressure].

PubMed

Tu, Xin; Lu, Sheng-yong; Yan, Jian-hua; Ma, Zeng-yi; Pan, Xin-chao; Cen, Ke-fa; Cheron, Bruno

2006-10-01

The optical emission spectra of DC argon plasma at atmospheric pressure were measured inside and outside the arc chamber. The electron temperature was determined from the Boltzmann plot, and the electron density was derived from Stark broadening of Ar I lines. The criteria for the existence of local thermodynamic equilibrium (LTE)in the plasma was discussed. The results indicate that the DC argon plasma at atmospheric pressure under our experimental conditions is in LTE.

Elimination of boron memory effect in inductively coupled plasma-mass spectrometry by ammonia gas injection into the spray chamber during analysis

NASA Astrophysics Data System (ADS)

Al-Ammar, Assad S.; Gupta, Rajesh K.; Barnes, Ramon M.

2000-06-01

Injection of 10-20 ml/min of ammonia gas into an inductively coupled plasma-mass spectrometry (ICP-MS) spray chamber during boron determination eliminates the memory effect of a 1 μg/ml B solution within a 2-min washing time. Ammonia gas injection also reduces the boron blank by a factor of four and enhances the sensitivity by 33-90%. Boron detection limits are improved from 12 and 14 to 3 and 4 ng/ml, respectively, for two ICP-MS instruments. Trace boron concentrations in certified reference materials agree well using ammonia gas injection.

Crossed-field divertor for a plasma device

DOEpatents

Kerst, Donald W.; Strait, Edward J.

1981-01-01

A divertor for removal of unwanted materials from the interior of a magnetic plasma confinement device includes the division of the wall of the device into segments insulated from each other in order to apply an electric field having a component perpendicular to the confining magnetic field. The resulting crossed-field drift causes electrically charged particles to be removed from the outer part of the confinement chamber to a pumping chamber. This method moves the particles quickly past the saddle point in the poloidal magnetic field where they would otherwise tend to stall, and provides external control over the rate of removal by controlling the magnitude of the electric field.

Plasma Emission Characteristics from a High Current Hollow Cathode in an Ion Thruster Discharge Chamber

NASA Technical Reports Server (NTRS)

Foster, John E.; Patterson, Michael J.

2002-01-01

The presence of energetic ions produced by a hollow cathodes operating at high emission currents (greater than 5A) has been documented in the literature. In order to further elucidate these findings, an investigation of a high current cathode operating in an ion thruster discharge chamber has been undertaken. Using Langmuir probes, a low energy charged particle analyzer and emission spectroscopy, the behavior of the near-cathode plasma and the emitted ion energy distribution was characterized. The presence of energetic ions was confirmed. It was observed that these ions had energies in excess of the discharge voltage and thus cannot be simply explained by ions falling out of plasma through a potential difference of this order. Additionally, evidence provided by Langmuir probes suggests the existence of a double layer essentially separating the hollow cathode plasma column from the main discharge. The radial potential difference associated with this double layer was measured to be of order the ionization potential.

Nanomaterial release characteristics in a single-walled carbon nanotube manufacturing workplace

NASA Astrophysics Data System (ADS)

Ji, Jun Ho; Kim, Jong Bum; Lee, Gwangjae; Bae, Gwi-Nam

2015-02-01

As carbon nanotubes (CNTs) are widely used in various applications, exposure assessment also increases in importance with other various toxicity tests for CNTs. We conducted 24-h continuous nanoaerosol measurements to identify possible nanomaterial release in a single-walled carbon nanotube (SWCNT) manufacturing workplace. Four real-time aerosol instruments were used to determine the nanosized and microsized particle numbers, particle surface area, and carbonaceous species. Task-based exposure assessment was carried out for SWCNT synthesis using the arc plasma and thermal decomposition processes to remove amorphous carbon components as impurities. During the SWCNT synthesis, the black carbon (BC) concentration was 2-12 μg/m3. The maximum BC mass concentrations occurred when the synthesis chamber was opened for harvesting the SWCNTs. The number concentrations of particles with sizes 10-420 nm were 10,000-40,000 particles/cm3 during the tasks. The maximum number concentration existed when a vacuum pump was operated to remove exhaust air from the SWCNT synthesis chamber due to the penetration of highly concentrated oil mists through the window opened. We analyzed the particle mass size distribution and particle number size distribution for each peak episode. Using real-time aerosol detectors, we distinguished the SWCNT releases from background nanoaerosols such as oil mist and atmospheric photochemical smog particles. SWCNT aggregates with sizes of 1-10 μm were mainly released from the arc plasma synthesis. The harvesting process was the main release route of SWCNTs in the workplace.

Characterization of atomic oxygen from an ECR plasma source

NASA Astrophysics Data System (ADS)

Naddaf, M.; Bhoraskar, V. N.; Mandale, A. B.; Sainkar, S. R.; Bhoraskar, S. V.

2002-11-01

A low-power microwave-assisted electron cyclotron resonance (ECR) plasma system is shown to be a powerful and effective source of atomic oxygen (AO) useful in material processing. A 2.45 GHz microwave source with maximum power of 600 W was launched into the cavity to generate the ECR plasma. A catalytic nickel probe was used to determine the density of AO. The density of AO is studied as a function of pressure and axial position of the probe in the plasma chamber. It was found to vary from ~1×1020 to ~10×1020 atom m-3 as the plasma pressure was varied from 0.8 to 10 mTorr. The effect of AO in oxidation of silver is investigated by gravimetric analysis. The stoichiometric properties of the oxide are studied using the x-ray photoelectron spectroscopy as well as energy dispersive x-ray analysis. The degradation of the silver surface due to sputtering effect was viewed by scanning electron spectroscopy. The sputtering yield of oxygen ions in the plasma is calculated using the TRIM code. The effects of plasma pressure and the distance from the ECR zone on the AO density were also investigated. The density of AO measured by oxidation of silver is in good agreement with results obtained from the catalytic nickel probe.

Diamond film growth from fullerene precursors

DOEpatents

Gruen, Dieter M.; Liu, Shengzhong; Krauss, Alan R.; Pan, Xianzheng

1997-01-01

A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.

A burner for plasma-coal starting of a boiler

NASA Astrophysics Data System (ADS)

Peregudov, V. S.

2008-04-01

Advanced schemes of a plasma-coal burner with single-and two-stage chambers for thermochemical preparation of fuel are described. The factors causing it becoming contaminated with slag during oil-free starting of a boiler are considered, and methods for preventing this phenomenon are pointed out.

Resonant-cavity antenna for plasma heating

DOEpatents

Perkins, Jr., Francis W.; Chiu, Shiu-Chu; Parks, Paul; Rawls, John M.

1987-01-01

Disclosed is a resonant coil cavity wave launcher for energizing a plasma immersed in a magnetic field. Energization includes launching fast Alfven waves to excite ion cyclotron frequency resonances in the plasma. The cavity includes inductive and capacitive reactive members spaced no further than one-quarter wavelength from a first wall confinement chamber of the plasma. The cavity wave launcher is energized by connection to a waveguide or transmission line carrying forward power from a remote radio frequency energy source.

Electron beam extraction on plasma cathode electron sources system

NASA Astrophysics Data System (ADS)

Purwadi, Agus; Taufik, M., Lely Susita R.; Suprapto, Saefurrochman, H., Anjar A.; Wibowo, Kurnia; Aziz, Ihwanul; Siswanto, Bambang

2017-03-01

ELECTRON BEAM EXTRACTION ON PLASMA CATHODE ELECTRON SOURCES SYSTEM. The electron beam extraction through window of Plasma Generator Chamber (PGC) for Pulsed Electron Irradiator (PEI) device and simulation of plasma potential has been studied. Plasma electron beam is extracted to acceleration region for enlarging their power by the external accelerating high voltage (Vext) and then it is passed foil window of the PEI for being irradiated to any target (atmospheric pressure). Electron beam extraction from plasma surface must be able to overcome potential barrier at the extraction window region which is shown by estimate simulation (Opera program) based on data of plasma surface potential of 150 V with Ueks values are varied by 150 kV, 175 kV and 200 kV respectively. PGC is made of 304 stainless steel with cylindrical shape in 30 cm of diameter, 90 cm length, electrons extraction window as many as 975 holes on the area of (15 × 65) cm2 with extraction hole cell in 0.3 mm of radius each other, an cylindrical shape IEP chamber is made of 304 stainless steel in 70 cm diameter and 30 cm length. The research result shown that the acquisition of electron beam extraction current depends on plasma parameters (electron density ne, temperature Te), accelerating high voltage Vext, the value of discharge parameter G, anode area Sa, electron extraction window area Se and extraction efficiency value α.

Analytical investigation of microwave resonances of a curling probe for low and high-pressure plasma diagnostics

NASA Astrophysics Data System (ADS)

Arshadi, Ali; Brinkmann, Ralf Peter

2017-01-01

The concept of ‘active plasma resonance spectroscopy’ (APRS) has attracted greater interest in recent years as an established plasma diagnostic technique. The APRS describes a class of related methods utilizing the intrinsic ability of plasma to resonate at or near the electron plasma frequency {ω\\text{pe}} . The Curling probe (CP) as a novel realization of the APRS idea, is a miniaturized spiral slot embedded flatly in the chamber wall. Consequently, a plasma diagnostic technique with minimum disturbance and without metal contamination can be developed. To measure the plasma parameters the CP is fed with a weak frequency-swept signal from the exterior of the plasma chamber by a network analyzer which also records the response of the plasma versus the frequency. The resonance behavior is strongly dependent on the electron density and the gas pressure. The CP has also the advantage of resonating at a frequency greater than {ω\\text{pe}} which is dependent on the spiral’s length. The double resonance characteristic gives the CP the ability to be applied in varying plasma regimes. Assuming that the spiralization does not have a considerable effect on the resonances, a ‘straightened’ infinite length CP has recently been investigated (Arshadi and Brinkmann 2016 Plasma Sources Sci. Technol. 25 045014) to obtain the surface wave resonances. This work generalizes the approach and models the CP by a rectangular slot-type resonator located between plasma and quartz. Cold plasma theory and Maxwell’s equations are utilized to compute the electromagnetic fields propagating into the plasma by the diffraction of an incident plane wave at the slot. A mathematical model is employed and both kinds of resonances are derived. The analytical study of this paper shows good agreement with the numerical results of the probe inventors.

Uniformity studies of inductively coupled plasma etching in fabrication of HgCdTe detector arrays

NASA Astrophysics Data System (ADS)

Bommena, R.; Velicu, S.; Boieriu, P.; Lee, T. S.; Grein, C. H.; Tedjojuwono, K. K.

2007-04-01

Inductively coupled plasma (ICP) chemistry based on a mixture of CH 4, Ar, and H II was investigated for the purpose of delineating HgCdTe mesa structures and vias typically used in the fabrication of second and third generation infrared photo detector arrays. We report on ICP etching uniformity results and correlate them with plasma controlling parameters (gas flow rates, total chamber pressure, ICP power and RF power). The etching rate and surface morphology of In-doped MWIR and LWIR HgCdTe showed distinct dependences on the plasma chemistry, total pressure and RF power. Contact stylus profilometry and cross-section scanning electron microscopy (SEM) were used to characterize the anisotropy of the etched profiles obtained after various processes and a standard deviation of 0.06 μm was obtained for etch depth on 128 x 128 format array vias. The surface morphology and the uniformity of the etched surfaces were studied by plan view SEM. Atomic force microscopy was used to make precise assessments of surface roughness.

Tokamak with in situ magnetohydrodynamic generation of toroidal magnetic field

DOEpatents

Schaffer, Michael J.

1986-01-01

A tokamak apparatus includes an electrically conductive metal pressure vessel for defining a chamber and confining liquid therein. A liner disposed within said chamber defines a toroidal space within the liner and confines gas therein. The metal vessel provides an electrically conductive path linking the toroidal space. Liquid metal is forced outwardly through the chamber outside of the toroidal space to generate electric current in the conductive path and thereby generate a toroidal magnetic field within the toroidal space. Toroidal plasma is developed within the toroidal space about the major axis thereof.

The MaPLE device of Saha Institute of Nuclear Physics: construction and its plasma aspects.

PubMed

Pal, Rabindranath; Biswas, Subir; Basu, Subhasis; Chattopadhyay, Monobir; Basu, Debjyoti; Chaudhuri, Manis; Chowdhuri, Manis

2010-07-01

The Magnetized Plasma Linear Experimental (MaPLE) device is a low cost laboratory plasma device at Saha Institute of Nuclear Physics fabricated in-house with the primary aim of studying basic plasma physics phenomena such as plasma instabilities, wave propagation, and their nonlinear behavior in magnetized plasma regime in a controlled manner. The machine is specially designed to be a versatile laboratory device that can provide a number of magnetic and electric scenario to facilitate such studies. A total of 36 number of 20-turn magnet coils, designed such as to allow easy handling, is capable of producing a uniform, dc magnetic field of about 0.35 T inside the plasma chamber of diameter 0.30 m. Support structure of the coils is planned in an innovative way facilitating straightforward fabrication and easy positioning of the coils. Further special feature lies in the arrangement of the spacers between the coils that can be maneuvered rather easily to create different magnetic configurations. Various methods of plasma production can be suitably utilized according to the experimental needs at either end of the vacuum vessel. In the present paper, characteristics of a steady state plasma generated by electron cyclotron resonance method using 2.45 GHz microwave power are presented. Scans using simple probe drives revealed that a uniform and long plasma column having electron density approximately 3-5x10(10) cm(-3) and temperature approximately 7-10 eV, is formed in the center of the plasma chamber which is suitable for wave launching experiments.

Diamond film growth from fullerene precursors

DOEpatents

Gruen, D.M.; Liu, S.; Krauss, A.R.; Pan, X.

1997-04-15

A method and system are disclosed for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate. 10 figs.

Fast quench reactor and method

DOEpatents

Detering, Brent A.; Donaldson, Alan D.; Fincke, James R.; Kong, Peter C.

2002-01-01

A fast quench reaction includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a restrictive convergent-divergent nozzle at its outlet end. Reactants are injected into the reactor chamber. The resulting heated gaseous stream is then rapidly cooled by passage through the nozzle. This "freezes" the desired end product(s) in the heated equilibrium reaction stage.

Fast quench reactor and method

DOEpatents

Detering, Brent A.; Donaldson, Alan D.; Fincke, James R.; Kong, Peter C.

1998-01-01

A fast quench reaction includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a restrictive convergent-divergent nozzle at its outlet end. Reactants are injected into the reactor chamber. The resulting heated gaseous stream is then rapidly cooled by passage through the nozzle. This "freezes" the desired end product(s) in the heated equilibrium reaction stage.

Fast quench reactor and method

DOEpatents

Detering, Brent A.; Donaldson, Alan D.; Fincke, James R.; Kong, Peter C.

2002-09-24

A fast quench reaction includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a restrictive convergent-divergent nozzle at its outlet end. Reactants are injected into the reactor chamber. The resulting heated gaseous stream is then rapidly cooled by passage through the nozzle. This "freezes" the desired end product(s) in the heated equilibrium reaction stage.

Advanced space propulsion thruster research

NASA Technical Reports Server (NTRS)

Wilbur, P. J.

1981-01-01

Experiments showed that stray magnetic fields can adversely affect the capacity of a hollow cathode neutralizer to couple to an ion beam. Magnetic field strength at the neutralizer cathode orifice is a crucial factor influencing the coupling voltage. The effects of electrostatic accelerator grid aperture diameters on the ion current extraction capabilities were examined experimentally to describe the divergence, deflection, and current extraction capabilities of grids with the screen and accelerator apertures displaced relative to one another. Experiments performed in orificed, mercury hollow cathodes support the model of field enhanced thermionic electron mission from cathode inserts. Tests supported the validity of a thermal model of the cathode insert. A theoretical justification of a Saha equation model relating cathode plasma properties is presented. Experiments suggest that ion loss rates to discharge chamber walls can be controlled. A series of new discharge chamber magnetic field configurations were generated in the flexible magnetic field thruster and their effect on performance was examined. A technique used in the thruster to measure ion currents to discharge chamber walls is described. Using these ion currents the fraction of ions produced that are extracted from the discharge chamber and the energy cost of plasma ions are computed.

Low Temperature Deposition and Characterization of N- and P-Type Silicon Carbide Thin Films and Associated Ohmic and Schottky Contacts

DTIC Science & Technology

1993-12-01

properties which make it an attractive material for electronic devices used in high temperature and power applications. In order to make useful...remote plasma chamber. The processing parameters were a pressure of 18 mTorr and a power output of 20 Watts; a flow of 10 sccm of hydrogen gas was...Table I. Growth Conditions for the AIN films Temperature 1050 C Al evaporation temperature 1260 "C Nitrogen flow rate 3.5 sccrn Microwave power 100W

DOE Office of Scientific and Technical Information (OSTI.GOV)

Thuillier, T.; Lamy, T.; Latrasse, L.

A-PHOENIX is a new compact hybrid electron cyclotron resonance ion source using a large permanent magnet hexapole (1.92 T at the magnet surface) and high temperature superconducting Solenoids (3 T) to make min-vertical bar B vertical bar structure suitable for 28 GHz cw operation. The final assembly of the source was achieved at the end of June 2007. The first plasma of A-PHOENIX at 18 GHz was done on the 16th of August, 2007. The technological specificities of A-PHOENIX are presented. The large hexapole built is presented and experimental magnetic measurements show that it is nominal with respect to simulation.more » A fake plasma chamber prototype including thin iron inserts showed that the predicted radial magnetic confinement can be fulfilled up to 2.15 T at the plasma chamber wall. Scheduled planning of experiments until the end of 2008 is presented.« less

CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY: Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber

NASA Astrophysics Data System (ADS)

Zhang, Xiao-Dan; Sun, Fu-He; Wei, Chang-Chun; Sun, Jian; Zhang, De-Kun; Geng, Xin-Hua; Xiong, Shao-Zhen; Zhao, Ying

2009-10-01

This paper studies boron contamination at the interface between the p and i layers of μc-Si:H solar cells deposited in a single-chamber PECVD system. The boron depth profile in the i layer was measured by Secondary Ion Mass Spectroscopy. It is found that the mixed-phase μc-Si:H materials with 40% crystalline volume fraction is easy to be affected by the residual boron in the reactor. The experimental results showed that a 500-nm thick μc-Si:H covering layer or a 30-seconds of hydrogen plasma treatment can effectively reduce the boron contamination at the p/i interface. However, from viewpoint of cost reduction, the hydrogen plasma treatment is desirable for solar cell manufacture because the substrate is not moved during the hydrogen plasma treatment.

Analytical investigation into the resonance frequencies of a curling probe

NASA Astrophysics Data System (ADS)

Arshadi, Ali; Brinkmann, Ralf Peter

2016-08-01

The term ‘active plasma resonance spectroscopy’ (APRS) denotes a class of closely related plasma diagnostic methods which utilize the natural ability of plasmas to resonate on or near the electron plasma frequency {ω\\text{pe}} ; an electrical radio frequency signal (in the GHz range) is coupled into the plasma via an antenna or a probe, the spectral response is recorded and a mathematical model is employed to determine plasma parameters such as the plasma density and the electron temperature. The curling probe, recently invented by Liang et al (2011 Appl. Phys. Express 4 066101), is a novel realization of the APRS concept which has many practical advantages. In particular, it can be miniaturized and flatly embedded into the chamber wall, thus allowing the monitoring of plasma processes without contamination nor disturbance. Physically, the curling probe can be understood as a ‘coiled’ form of the hairpin probe (Stenzel 1976 Rev. Sci. Instrum. 47 603). Assuming that the spiralization of the probe has little electrical effect, this paper investigates the characteristcs of a ‘straightened’ curling probe by modeling it as an infinite slot-type resonator that is in direct contact with the plasma. The diffraction of an incident plane wave at the slot is calculated by solving the cold plasma model and Maxwell’s equations simultaneously. The resonance frequencies of the probe are derived and are found to be in good agreement with the numerical results of the probe inventors.

Magnetic Flux Compression Experiments Using Plasma Armatures

NASA Technical Reports Server (NTRS)

Turner, M. W.; Hawk, C. W.; Litchford, R. J.

2003-01-01

Magnetic flux compression reaction chambers offer considerable promise for controlling the plasma flow associated with various micronuclear/chemical pulse propulsion and power schemes, primarily because they avoid thermalization with wall structures and permit multicycle operation modes. The major physical effects of concern are the diffusion of magnetic flux into the rapidly expanding plasma cloud and the development of Rayleigh-Taylor instabilities at the plasma surface, both of which can severely degrade reactor efficiency and lead to plasma-wall impact. A physical parameter of critical importance to these underlying magnetohydrodynamic (MHD) processes is the magnetic Reynolds number (R(sub m), the value of which depends upon the product of plasma electrical conductivity and velocity. Efficient flux compression requires R(sub m) less than 1, and a thorough understanding of MHD phenomena at high magnetic Reynolds numbers is essential to the reliable design and operation of practical reactors. As a means of improving this understanding, a simplified laboratory experiment has been constructed in which the plasma jet ejected from an ablative pulse plasma gun is used to investigate plasma armature interaction with magnetic fields. As a prelude to intensive study, exploratory experiments were carried out to quantify the magnetic Reynolds number characteristics of the plasma jet source. Jet velocity was deduced from time-of-flight measurements using optical probes, and electrical conductivity was measured using an inductive probing technique. Using air at 27-inHg vacuum, measured velocities approached 4.5 km/s and measured conductivities were in the range of 30 to 40 kS/m.

Dose-current discharge correlation analysis in a Mather type Plasma Focus device for medical applications

NASA Astrophysics Data System (ADS)

Sumini, M.; Mostacci, D.; Tartari, A.; Mazza, A.; Cucchi, G.; Isolan, L.; Buontempo, F.; Zironi, I.; Castellani, G.

2017-11-01

In a Plasma Focus device the plasma collapses into the pinch where it reaches thermonuclear conditions for a few tens of nanoseconds, becoming a multi-radiation source. The nature of the radiation generated depends on the gas filling the chamber and the device working parameters. The self-collimated electron beam generated in the backward direction with respect to the plasma motion is one of the main radiation sources of interest also for medical applications. The electron beam may be guided against a high Z material target to produce an X-ray beam. This technique offers an ultra-high dose rate source of X-rays, able to deliver during the pinch a massive dose (up to 1 Gy per discharge for the PFMA-3 test device), as measured with EBT3 GafchromicⒸfilm tissue equivalent dosimeters. Given the stochastic behavior of the discharge process, a reliable on-line estimate of the dose-delivered is a very challenging task, in some way preventing a systematic application as a potentially interesting therapy device. This work presents an approach to linking the dose registered by the EBT3 GafchromicⒸfilms with the information contained in the signal recorded during the current discharge process. Processing the signal with the Wigner-Ville distribution, a spectrogram was obtained, displaying the information on intensity at various frequency scales, identifying the band of frequencies representative of the pinch events and define some patterns correlated with the dose.

Apparatus for generating quasi-free-space microwave-driven plasmas

NASA Astrophysics Data System (ADS)

Hoff, Brad W.; French, David M.; Reid, Remington R.; Lawrance, Julie E.; Lepell, P. David; Maestas, Sabrina S.

2016-03-01

An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ˜5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM.

Production of a large, quiescent, magnetized plasma

NASA Technical Reports Server (NTRS)

Landt, D. L.; Ajmera, R. C.

1976-01-01

An experimental device is described which produces a large homogeneous quiescent magnetized plasma. In this device, the plasma is created in an evacuated brass cylinder by ionizing collisions between electrons emitted from a large-diameter electron gun and argon atoms in the chamber. Typical experimentally measured values of the electron temperature and density are presented which were obtained with a glass-insulated planar Langmuir probe. It is noted that the present device facilitates the study of phenomena such as waves and diffusion in magnetized plasmas.

Investigation into the effect of plasma pretreatment on the adhesion of parylene to various substrates

NASA Technical Reports Server (NTRS)

Riley, T.; Mahuson, T. C.; Seibert, K.

1979-01-01

A procedure is described for using argon and oxygen plasmas to promote adhesion of parylene coatings upon many difficult-to-bond substrates. Substrates investigated were gold, nickel, kovar, teflon (FEP), kapton, silicon, tantalum, titanium, and tungsten. Without plasma treatment, 180 deg peel tests yield a few g/cm (oz/in) strengths. With dc plasma treatment in the deposition chamber, followed by coating, peel strengths are increased by one to two orders of magnitude.

Apparatus for generating quasi-free-space microwave-driven plasmas

DOE Office of Scientific and Technical Information (OSTI.GOV)

Hoff, Brad W.; French, David M.; Reid, Remington R.

An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ∼5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM.

Apparatus for generating quasi-free-space microwave-driven plasmas.

PubMed

Hoff, Brad W; French, David M; Reid, Remington R; Lawrance, Julie E; Lepell, P David; Maestas, Sabrina S

2016-03-01

An apparatus for generating quasi-free-space microwave-driven plasmas has been designed, constructed, and tested. The plasma is driven by a multi-kW, ∼5 GHz microwave beam focused at the center of a vacuum chamber using a Koch-type metal plate lens. Sustained plasma discharges have been generated in argon at pressures ranging from 150 to 200 mTorr, at beam power levels ranging from 5 to 10 kW, and at gas flow rates of approximately 200 SCCM.

Plasma control and utilization

DOEpatents

Ensley, Donald L.

1976-12-28

A plasma is confined and heated by a microwave field resonant in a cavity excited in a combination of the TE and TM modes while responding to the resonant frequency of the cavity as the plasma dimensions change to maintain operation at resonance. The microwave field is elliptically or circularly polarized as to prevent the electromagnetic confining field from going to zero. A high Q chamber having superconductive walls is employed to minimize wall losses while providing for extraction of thermonuclear energy produced by fusion of nuclei in the plasma.

Improved di-p-xylylene polymer and apparatus and method for making the same

DOEpatents

Jahn, R.K.; Liepins, R.

Solid di-para-xylyene dimer is sublimed in a sublimation furnace at approximately 100 to 200/sup 0/C and subsequently conducted to a pyrolysis furnace where it is pyrolyzed to the diradical p-xylylene monomer while in the vapor state at approximately 600 degrees C. The diradical monomer is then introduced into a deposition chamber for deposition onto a suitable substrate. The deposition chamber includes electrodes for producing a low pressure plasma through which the diradical monomer passes prior to deposition. The interaction of the diradical monomer with the low pressure plasma results in the formation of poly-p-xylyene film which is exceptionally hard and thermally stable.

Microwave Assisted Helicon Plasmas

NASA Astrophysics Data System (ADS)

McKee, John; Caron, David; Jemiolo, Andrew; Scime, Earl

2017-10-01

The use of two (or more) rf sources at different frequencies is a common technique in the plasma processing industry to control ion energy characteristics separately from plasma generation. A similar approach is presented here with the focus on modifying the electron population in argon and helium plasmas. The plasma is generated by a helicon source at a frequency f0 = 13.56 MHz. Microwaves of frequency f1 = 2.45 GHz are then injected into the helicon source chamber perpendicular to the background magnetic field. The microwaves damp on the electrons via X-mode Electron Cyclotron Heating (ECH) at the upper hybrid resonance, providing additional energy input into the electrons. The effects of this secondary-source heating on electron density, temperature, and energy distribution function are examined and compared to helicon-only single source plasmas as well as numeric models suggesting that the heating is not evenly distributed. Optical Emission Spectroscopy (OES) is used to examine the impact of the energetic tail of the electron distribution on ion and neutral species via collisional excitation. Large enhancements of neutral spectral lines are observed in both Ar and He. While small enhancement of ion lines is seen in Ar, ion lines not normally present in He are observed during microwave injection. U.S. National Science Foundation Grant No. PHY-1360278.

Effect of confining wall potential on charged collimated dust beam in low-pressure plasma

NASA Astrophysics Data System (ADS)

Kausik, S. S.; Kakati, B.; Saikia, B. K.

2013-05-01

The effect of confining wall potential on charged collimated dust beam in low-pressure plasma has been studied in a dusty plasma experimental setup by applying electrostatic field to each channel of a multicusp magnetic cage. Argon plasma is produced by hot cathode discharge method at a pressure of 5×10-4 millibars and is confined by a full line cusped magnetic field confinement system. Silver dust grains are produced by gas-evaporation technique and move upward in the form of a collimated dust beam due to differential pressure maintained between the dust and plasma chambers. The charged grains in the beam after coming out from the plasma column enter into the diagnostic chamber and are deflected by a dc field applied across a pair of deflector plates at different confining potentials. Both from the amount of deflection and the floating potential, the number of charges collected by the dust grains is calculated. Furthermore, the collimated dust beam strikes the Faraday cup, which is placed above the deflector plates, and the current (˜pA) so produced is measured by an electrometer at different confining potentials. The experimental results demonstrate the significant effect of confining wall potential on charging of dust grains.

Correlating ion energies and CF{sub 2} surface production during fluorocarbon plasma processing of silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Martin, Ina T.; Zhou Jie; Fisher, Ellen R.

2006-07-01

Ion energy distribution (IED) measurements are reported for ions in the plasma molecular beam source of the imaging of radicals interacting with surfaces (IRIS) apparatus. The IEDs and relative intensities of nascent ions in C{sub 3}F{sub 8} and C{sub 4}F{sub 8} plasma molecular beams were measured using a Hiden PSM003 mass spectrometer mounted on the IRIS main chamber. The IEDs are complex and multimodal, with mean ion energies ranging from 29 to 92 eV. Integrated IEDs provided relative ion intensities as a function of applied rf power and source pressure. Generally, higher applied rf powers and lower source pressures resultedmore » in increased ion intensities and mean ion energies. Most significantly, a comparison to CF{sub 2} surface interaction measurements previously made in our laboratories reveals that mean ion energies are directly and linearly correlated to CF{sub 2} surface production in these systems.« less

Cold Atmospheric-Pressure Plasmas Applied to Active Packaging of Fruits and Vegetables

NASA Astrophysics Data System (ADS)

Pedrow, Patrick; Fernandez, Sulmer; Pitts, Marvin

2008-10-01

Active packaging of fruits and vegetables uses films that absorb molecules from or contribute molecules to the produce. Applying uniform film to specific parts of a plant will enhance safe and economic adoption of expensive biofilms and biochemicals which would damage the plant or surrounding environment if misapplied. The pilot application will be to apply wax film to apples, replacing hot wax which is expensive and lowers the textural quality of the apple. The plasma zone will be obtained by increasing the voltage on an electrode structure until the electric field in the feed material (Argon + monomer) is sufficiently high to yield electron avalanches. The ``corona onset criterion'' is used to design the cold plasma reactor. The apple will be placed in a treatment chamber downstream from the activation zone. Key physical properties of the film will be measured. The deposition rate will be optimized in terms of economics and fruit surface quality for the purpose of determining if the technique is competitive in food processing plants.

A study of GaN-based LED structure etching using inductively coupled plasma

NASA Astrophysics Data System (ADS)

Wang, Pei; Cao, Bin; Gan, Zhiyin; Liu, Sheng

2011-02-01

GaN as a wide band gap semiconductor has been employed to fabricate optoelectronic devices such as light-emitting diodes (LEDs) and laser diodes (LDs). Recently several different dry etching techniques for GaN-based materials have been developed. ICP etching is attractive because of its superior plasma uniformity and strong controllability. Most previous reports emphasized on the ICP etching characteristics of single GaN film. In this study dry etching of GaN-based LED structure was performed by inductively coupled plasmas (ICP) etching with Cl2 as the base gas and BCl3 as the additive gas. The effects of the key process parameters such as etching gases flow rate, ICP power, RF power and chamber pressure on the etching properties of GaN-based LED structure including etching rate, selectivity, etched surface morphology and sidewall was investigated. Etch depths were measured using a depth profilometer and used to calculate the etch rates. The etch profiles were observed with a scanning electron microscope (SEM).

Next Generation H- Ion Sources for the SNS

NASA Astrophysics Data System (ADS)

Welton, R. F.; Stockli, M. P.; Murray, S. N.; Crisp, D.; Carmichael, J.; Goulding, R. H.; Han, B.; Tarvainen, O.; Pennisi, T.; Santana, M.

2009-03-01

The U.S. Spallation Neutron Source (SNS) is the leading accelerator-based, pulsed neutron-scattering facility, currently in the process of ramping up neutron production. In order to insure meeting operational requirements as well as providing for future facility beam power upgrades, a multifaceted H- ion source development program is ongoing. This work discusses several aspects of this program, specifically the design and first beam measurements of an RF-driven, external antenna H- ion source based on an A1N ceramic plasma chamber, elemental and chromate Cs-systems, and plasma ignition gun. Unanalyzed beam currents of up to ˜100 mA (60 Hz, 1 ms) have been observed and sustained currents >60 mA (60 Hz, 1 ms) have been demonstrated on the test stand. Accelerated beam currents of ˜40 mA have also been demonstrated into the SNS front end. Data are also presented describing the first H- beam extraction experiments from a helicon plasma generator based on the Variable Specific Impulse Magnetoplasma Rocket (VASIMR) engine design.

Neutron monitoring and electrode calorimetry experiments in the HIP-1 Hot Ion Plasma

NASA Technical Reports Server (NTRS)

Reinmann, J. J.; Layman, R. W.

1977-01-01

Results are presented for two diagnostic procedures on HIP-1: neutron diagnostics to determine where neutrons originated within the plasma discharge chamber and electrode calorimetry to measure the steady-state power absorbed by the two anodes and cathodes. Results are also reported for a hot-ion plasma formed with a continuous-cathode rod, one that spans the full length of the test section, in place of the two hollow cathodes. The outboard neutron source strength increased relative to that at the midplane when (1) the cathode tips were moved farther outboard, (2) the anode diameters were increased, and (3) one of the anodes was removed. The distribution of neutron sources within the plasma discharge chamber was insensitive to the division of current between the two cathodes. For the continuous cathode, increasing the discharge current increased the midplane neutron source strength relative to the outboard source strength. Each cathode absorbed from 12 to 15 percent of the input power regardless of the division of current between the cathodes. The anodes absorbed from 20 to 40 percent of the input power. The division of power absorption between the anodes varied with plasma operating conditions and electrode placement.

Calibration of neutron detectors on the Joint European Torus.

PubMed

Batistoni, Paola; Popovichev, S; Conroy, S; Lengar, I; Čufar, A; Abhangi, M; Snoj, L; Horton, L

2017-10-01

The present paper describes the findings of the calibration of the neutron yield monitors on the Joint European Torus (JET) performed in 2013 using a 252 Cf source deployed inside the torus by the remote handling system, with particular regard to the calibration of fission chambers which provide the time resolved neutron yield from JET plasmas. The experimental data obtained in toroidal, radial, and vertical scans are presented. These data are first analysed following an analytical approach adopted in the previous neutron calibrations at JET. In this way, a calibration function for the volumetric plasma source is derived which allows us to understand the importance of the different plasma regions and of different spatial profiles of neutron emissivity on fission chamber response. Neutronics analyses have also been performed to calculate the correction factors needed to derive the plasma calibration factors taking into account the different energy spectrum and angular emission distribution of the calibrating (point) 252 Cf source, the discrete positions compared to the plasma volumetric source, and the calibration circumstances. All correction factors are presented and discussed. We discuss also the lessons learnt which are the basis for the on-going 14 MeV neutron calibration at JET and for ITER.

Plasma Chamber and First Wall of the Ignitor Experiment^*

NASA Astrophysics Data System (ADS)

Cucchiaro, A.; Coppi, B.; Bianchi, A.; Lucca, F.

2005-10-01

The new designs of the Plasma Chamber (PC) and of the First Wall (FW) system are based on updated scenarios for vertical plasma disruption (VDE) as well as estimates for the maximum thermal wall loadings at ignition. The PC wall thickness has been optimized to reduce the deformation during the worst disruption event without sacrificing the dimensions of the plasma column. A non linear dynamic analysis of the PC has been performed on a 360^o model of it, taking into account possible toroidal asymmetries of the halo current. Radial EM loads obtained by scaling JET measurements have been also considered. The low-cycle fatigue analysis confirms that the PC is able to meet a lifetime of few thousand cycles for the most extreme combinations of magnetic fields and plasma currents. The FW, made of Molybdenum (TZM) tiles covering the entire inner surface of the PC, has been designed to withstand thermal and EM loads, both under normal operating conditions and in case of disruption. Detailed elasto-plastic structural analyses of the most (EM) loaded tile-carriers show that these are compatible with the adopted fabrication requirements. ^*Sponsored in part by ENEA of Italy and by the U.S. DOE.

Evaluation of power transfer efficiency for a high power inductively coupled radio-frequency hydrogen ion source

NASA Astrophysics Data System (ADS)

Jain, P.; Recchia, M.; Cavenago, M.; Fantz, U.; Gaio, E.; Kraus, W.; Maistrello, A.; Veltri, P.

2018-04-01

Neutral beam injection (NBI) for plasma heating and current drive is necessary for International Thermonuclear Experimental reactor (ITER) tokamak. Due to its various advantages, a radio frequency (RF) driven plasma source type was selected as a reference ion source for the ITER heating NBI. The ITER relevant RF negative ion sources are inductively coupled (IC) devices whose operational working frequency has been chosen to be 1 MHz and are characterized by high RF power density (˜9.4 W cm-3) and low operational pressure (around 0.3 Pa). The RF field is produced by a coil in a cylindrical chamber leading to a plasma generation followed by its expansion inside the chamber. This paper recalls different concepts based on which a methodology is developed to evaluate the efficiency of the RF power transfer to hydrogen plasma. This efficiency is then analyzed as a function of the working frequency and in dependence of other operating source and plasma parameters. The study is applied to a high power IC RF hydrogen ion source which is similar to one simplified driver of the ELISE source (half the size of the ITER NBI source).

Injection of auxiliary electrons for increasing the plasma density in highly charged and high intensity ion sources.

PubMed

Odorici, F; Malferrari, L; Montanari, A; Rizzoli, R; Mascali, D; Castro, G; Celona, L; Gammino, S; Neri, L

2016-02-01

Different electron guns based on cold- or hot-cathode technologies have been developed since 2009 at INFN for operating within ECR plasma chambers as sources of auxiliary electrons, with the aim of boosting the source performances by means of a higher plasma lifetime and density. Their application to microwave discharge ion sources, where plasma is not confined, has required an improvement of the gun design, in order to "screen" the cathode from the plasma particles. Experimental tests carried out on a plasma reactor show a boost of the plasma density, ranging from 10% to 90% when the electron guns are used, as explained by plasma diffusion models.

Experimentally Determined Plasma Parameters in a 30 cm Ion Engine

NASA Technical Reports Server (NTRS)

Sengupta, Anita; Goebel, Dan; Fitzgerald, Dennis; Owens, Al; Tynan, George; Dorner, Russ

2004-01-01

Single planar Langmuir probes and fiber optic probes are used to concurrently measure the plasma properties and neutral density variation in a 30cm diameter ion engine discharge chamber, from the immediate vicinity of the keeper to the near grid plasma region. The fiber optic probe consists of a collimated optical fiber recessed into a double bore ceramic tube fitted with a stainless steel light-limiting window. The optical fiber probe is used to measure the emission intensity of excited neutral xenon for a small volume of plasma, at various radial and axial locations. The single Langmuir probes, are used to generate current-voltage characteristics at a total of 140 spatial locations inside the discharge chamber. Assuming a maxwellian distribution for the electron population, the Langmuir probe traces provide spatially resolved measurements of plasma potential, electron temperature, and plasma density. Data reduction for the NSTAR TH8 and TH15 throttle points indicates an electron temperature range of 1 to 7.9 eV and an electron density range of 4e10 to le13 cm(sup -3), throughout the discharge chamber, consistent with the results in the literature. Plasma potential estimates, computed from the first derivative of the probe characteristic, indicate potential from 0.5V to 11V above the discharge voltage along the thruster centerline. These values are believed to be excessively high due to the sampling of the primary electron population along the thruster centerline. Relative neutral density profiles are also obtained with a fiber optic probe sampling photon flux from the 823.1 nm excited to ground state transition. Plasma parameter measurements and neutral density profiles will be presented as a function of probe location and engine discharge conditions. A discussion of the measured electron energy distribution function will also be presented, with regards to variation from pure maxwellian. It has been found that there is a distinct primary population found along the thruster centerline, which causes estimates of electron temperature, electron density, and plasma potential, to err on the high side, due this energetic population. Computation of the energy distribution fimction of the plasma clearly indicates the presence of primaries, whose presence become less obvious with radial distance from the main discharge plume.

Integrated arc suppression unit for defect reduction in PVD applications

NASA Astrophysics Data System (ADS)

Li, Jason; Narasimhan, Murali K.; Pavate, Vikram; Loo, David; Rosenblum, Steve; Trubell, Larry; Scholl, Richard; Seamons, Scott; Hagerty, Chris; Ramaswami, Sesh

1997-09-01

Arcing between the target and plasma during PVD deposition causes substantial damage to the target and splats and other contamination on the deposited films. Arc-related damages and defects are frequently encountered in microelectronics manufacturing and contributes largely to reduced wafer yields. Arcing is caused largely by the charge buildup at the contaminated sites on the target surface that contains either nonconducting inclusions or nodules. Arc suppression is a key issue for defect reduction, yield improvement and for reliable high quality metallization. An Integrated Arc Suppression Unit (IASU) has been designed for Endura HP PVDTM sputtering sources. The integrated design reduces cable length from unit to source and reduces electrical energy stored in the cable. Active arc handling mode, proactive arc prevention mode, and passive by-pass arc counting mode are incorporated into the same unit. The active mode is designed to quickly respond to chamber conditions, like a large chamber voltage drop, that signals a arc. The self run mode is designed to proactively prevent arc formation by pulsing and reversing target voltage at 50 kHz. The design of the IASU, also called mini small package arc repression circuit--low energy unit (mini Sparc-le), has been optimized for various DC magnetron sources, plasma stability, chamber impedance, power matching, CE MARK test, and power dissipation. Process characterization with Ti, TiN and Al sputtering indicates that the unit has little adverse impact on film properties. Mini Sparc-le unit has been shown here to significantly reduce splats occurrence in Al sputtering. Marathon test of the unit with Ti/TiN test demonstrated the unit's reliability and its ability to reduce sensitivity of defects to target characteristics.

Plasma-free atomic layer deposition of Ru thin films using H{sub 2} molecules as a nonoxidizing reactant

DOE Office of Scientific and Technical Information (OSTI.GOV)

Lee, Seung-Joon; Kim, Soo-Hyun, E-mail: soohyun@ynu.ac.kr; Saito, Masayuki

2016-05-15

The ruthenium (Ru) thin films were grown by atomic layer deposition (ALD) using a sequential supply of dicarbonyl-bis(5-methyl-2,4-hexanediketonato) Ru(II) (C{sub 16}H{sub 22}O{sub 6}Ru) and H{sub 2} as a reactant at a substrate temperature of 250 °C. Deposition was possible using H{sub 2} molecules without a plasma by increasing the chamber pressure to above 10 Torr. Specifically, high-quality Ru films with a low resistivity of ∼40 μΩ cm and few amount of oxygen (∼1.2 at. %) were obtained under a chamber pressure of 300 Torr though the oxygen was contained in the precursor. Under the optimized conditions, self-limited film growth with regard to the precursormore » and reactant pulsing times was confirmed under elevated chamber pressures. The ALD-Ru process proposed in this study showed one of the highest growth rates of 0.12 nm/cycle on a thermally grown SiO{sub 2} substrate, as well as a very low number of incubation cycles (approximately 12 cycles). Cross-sectional view transmission electron microscopy showed that no interfacial oxide had formed during the deposition of the ALD-Ru films on a W surface using H{sub 2} molecules, whereas ∼7 nm thick interfacial oxide was formed when O{sub 2} molecules were used as a reactant. The step coverage of the ALD-Ru film onto very small-sized trenches (aspect ratio: ∼4.5 and the top opening size of 25 nm) and holes (aspect ratio: ∼40 and top opening size of 40 nm) was excellent (∼100%).« less

Fast quench reactor and method

DOEpatents

Detering, B.A.; Donaldson, A.D.; Fincke, J.R.; Kong, P.C.

1998-05-12

A fast quench reactor includes a reactor chamber having a high temperature heating means such as a plasma torch at its inlet and a restrictive convergent-divergent nozzle at its outlet end. Reactants are injected into the reactor chamber. The resulting heated gaseous stream is then rapidly cooled by passage through the nozzle. This ``freezes`` the desired end product(s) in the heated equilibrium reaction stage. 7 figs.

Research Technology

NASA Image and Video Library

2002-07-01

Dr. Tom Markusic, a propulsion research engineer at the Marshall Space Flight Center (MSFC), adjusts a diagnostic laser while a pulsed plasma thruster (PPT) fires in a vacuum chamber in the background. NASA/MSFC's Propulsion Research Center (PRC) is presently investigating plasma propulsion for potential use on future nuclear-powered spacecraft missions, such as human exploration of Mars.

Investigation of large-area multicoil inductively coupled plasma sources using three-dimensional fluid model

NASA Astrophysics Data System (ADS)

Brcka, Jozef

2016-07-01

A multi inductively coupled plasma (ICP) system can be used to maintain the plasma uniformity and increase the area processed by a high-density plasma. This article presents a source in two different configurations. The distributed planar multi ICP (DM-ICP) source comprises individual ICP sources that are not overlapped and produce plasma independently. Mutual coupling of the ICPs may affect the distribution of the produced plasma. The integrated multicoil ICP (IMC-ICP) source consists of four low-inductance ICP antennas that are superimposed in an azimuthal manner. The identical geometry of the ICP coils was assumed in this work. Both configurations have highly asymmetric components. A three-dimensional (3D) plasma model of the multicoil ICP configurations with asymmetric features is used to investigate the plasma characteristics in a large chamber and the operation of the sources in inert and reactive gases. The feasibility of the computational calculation, the speed, and the computational resources of the coupled multiphysics solver are investigated in the framework of a large realistic geometry and complex reaction processes. It was determined that additional variables can be used to control large-area plasmas. Both configurations can form a plasma, that azimuthally moves in a controlled manner, the so-called “sweeping mode” (SM) or “polyphase mode” (PPM), and thus they have the potential for large-area and high-density plasma applications. The operation in the azimuthal mode has the potential to adjust the plasma distribution, the reaction chemistry, and increase or modulate the production of the radicals. The intrinsic asymmetry of the individual coils and their combined operation were investigated within a source assembly primarily in argon and CO gases. Limited investigations were also performed on operation in CH4 gas. The plasma parameters and the resulting chemistry are affected by the geometrical relation between individual antennas. The aim of this work is to incorporate the technological, computational, dimensional scaling, and reaction chemistry aspects of the plasma under one computational framework. The 3D simulation is utilized to geometrically scale up the reactive plasma that is produced by multiple ICP sources.

Tailored plasma sprayed MCrAlY coatings for aircraft gas turbine applications

NASA Technical Reports Server (NTRS)

Pennisi, F. J.; Gupta, D. K.

1981-01-01

Eighteen plasma sprayed coating systems, nine based on the NiCoCrAly chemistry and nine based on the CoCrAly composition, were evaluated to identify coating systems which provide equivalent or superior life to that shown by the electron beam physical vapor deposited NiCoCrAly and CoCrAly coatings respectively. NiCoCrAly type coatings were examined on a single crystal alloy and the CoCrAly based coatings were optimized on the B1900+ Hf alloy. Cyclic burner rig oxidation and hot corrosion and tensile ductility tests used to evaluate the various coating candidates. For the single crystal alloy, a low pressure chamber plasma sprayed NiCoCrAly + Si coating exhibited a 2x oxidation life improvement at 1394 K (2050 F) over the vapor deposited NiCoCrAly material while showing equivalent tensile ductility. A silicon modified low pressure chamber plasma sprayed CoCrAly coating was found to be more durable than the baseline vapor deposited CoCrAly coating on the B1900+ Hf alloy.

Plume and Discharge Plasma Measurements of an NSTAR-type Ion Thruster

NASA Technical Reports Server (NTRS)

Foster, John E.; Soulas, George C.; Patterson, Michael J.

2000-01-01

The success of the NASA Deep Space 1 spacecraft has demonstrated that ion propulsion is a viable option for deep space science missions. More aggressive missions such as Comet Nuclear Sample Return and Europa lander will require higher power, higher propellant throughput and longer thruster lifetime than the NASA Solar Electric Propulsion Technology Application Readiness (NSTAR) engine. Presented here are thruster plume and discharge plasma measurements of an NSTAR-type thruster operated from 0.5 kW to 5 kW. From Faraday plume sweeps, beam divergence was determined. From Langmuir probe plume measurements on centerline, low energy ion production on axis due to charge-exchange and direct ionization was assessed. Additionally, plume plasma potential measurements made on axis were used to determine the upper energy limits at which ions created on centerline could be radially accelerated. Wall probes flush-mounted to the thruster discharge chamber anode were used to assess plasma conditions. Langmuir probe measurements at the wall indicated significant differences in the electron temperature in the cylindrical and conical sections of the discharge chamber.

Plume and Discharge Plasma Measurements of an NSTAR-type Ion Thruster

NASA Technical Reports Server (NTRS)

Foster, John E; Soulas, George C.; Patterson, Michael J.

2000-01-01

The success of the NASA Deep Space I spacecraft has demonstrated that ion propulsion is a viable option for deep space science missions. More aggressive missions such as Comet Nuclear Sample Return and Europa lander will require higher power, higher propellant throughput and longer thruster lifetime than the NASA Solar Electric Propulsion Technology Application Readiness (NSTAR) engine. Presented here are thruster plume and discharge plasma measurements of an NSTAR-type thruster operated from 0.5 kW to 5 kW. From Faraday plume sweeps, beam divergence was determined. From Langmuir probe plume measurements on centerline, low energy ion production on axis due to charge-exchange and direct ionization was assessed. Additionally, plume plasma potential measurements made on axis were used to determine the upper energy limits at which ions created on centerline could be radially accelerated. Wall probes flush-mounted to the thruster discharge chamber anode were used to assess plasma conditions. Langmuir probe measurements at the wall indicated significant differences in the electron temperature in the cylindrical and conical sections of the discharge chamber.

Low-pressure hydrogen discharge maintenance in a large-size plasma source with localized high radio-frequency power deposition

DOE Office of Scientific and Technical Information (OSTI.GOV)

Todorov, D.; Shivarova, A., E-mail: ashiva@phys.uni-sofia.bg; Paunska, Ts.

2015-03-15

The development of the two-dimensional fluid-plasma model of a low-pressure hydrogen discharge, presented in the study, is regarding description of the plasma maintenance in a discharge vessel with the configuration of the SPIDER source. The SPIDER source, planned for the neutral-beam-injection plasma-heating system of ITER, is with localized high RF power deposition to its eight drivers (cylindrical-coil inductive discharges) and a large-area second chamber, common for all the drivers. The continuity equations for the charged particles (electrons and the three types of positive ions) and for the neutral species (atoms and molecules), their momentum equations, the energy balance equations formore » electrons, atoms and molecules and the Poisson equations are involved in the discharge description. In addition to the local processes in the plasma volume, the surface processes of particle reflection and conversion on the walls as well as for a heat exchange with the walls are included in the model. The analysis of the results stresses on the role of the fluxes (particle and energy fluxes) in the formation of the discharge structure. The conclusion is that the discharge behavior is completely obeyed to non-locality. The latter is displayed by: (i) maximum values of plasma parameters (charged particle densities and temperatures of the neutral species) outside the region of the RF power deposition, (ii) shifted maxima of the electron density and temperature, of the plasma potential and of the electron production, (iii) an electron flux, with a vortex structure, strongly exceeding the total ion flux which gives evidence of a discharge regime of non-ambipolarity and (iv) a spatial distribution of the densities of the neutral species resulting from their fluxes.« less

Reactions between NO/+/ and metal atoms using magnetically confined afterglows

NASA Technical Reports Server (NTRS)

Lo, H. H.; Clendenning, L. M.; Fite, W. L.

1977-01-01

A new method of studying thermal energy ion-neutral collision processes involving nongaseous neutral atoms is described. A long magnetic field produced by a solenoid in a vacuum chamber confines a thermal-energy plasma generated by photoionization of gas at very low pressure. As the plasma moves toward the end of the field, it is crossed by a metal atom beam. Ionic products of ion-atom reactions are trapped by the field and both the reactant and product ions move to the end of the magnetic field where they are detected by a quadrupole mass filter. The cross sections for charge transfer between NO(+) and Na, Mg, Ca, and Sr and that for rearrangement between NO(+) and Ca have been obtained. The charge-transfer reaction is found strongly dominant over the rearrangement reaction that forms metallic oxide ions.

A fluid model simulation of a simplified plasma limiter based on spectral-element time-domain method

DOE Office of Scientific and Technical Information (OSTI.GOV)

Qian, Cheng; Ding, Dazhi, E-mail: dzding@njust.edu.cn; Fan, Zhenhong

2015-03-15

A simplified plasma limiter prototype is proposed and the fluid model coupled with Maxwell's equations is established to describe the operating mechanism of plasma limiter. A three-dimensional (3-D) simplified sandwich structure plasma limiter model is analyzed with the spectral-element time-domain (SETD) method. The field breakdown threshold of air and argon at different frequency is predicted and compared with the experimental data and there is a good agreement between them for gas microwave breakdown discharge problems. Numerical results demonstrate that the two-layer plasma limiter (plasma-slab-plasma) has better protective characteristics than a one-layer plasma limiter (slab-plasma-slab) with the same length of gasmore » chamber.« less

Development of a 0.1 μm linewidth fabrication process for x-ray lithography with a laser plasma source

NASA Astrophysics Data System (ADS)

Bobkowski, Romuald; Fedosejevs, Robert; Broughton, James N.

1999-06-01

A process has been developed for the purpose of fabricating 0.1 micron linewidth interdigital electrode patterns based on proximity x-ray lithography using a laser-plasma source. Such patterns are required in the manufacture of surface acoustic wave devices. The x-ray lithography was carried out using emission form a Cu plasma produced by a 15Hz, 248nm KrF excimer laser. A temporally multiplexed 50ps duration seed pulse was used to extract the KrF laser energy producing a train of several 50ps pulses spaced approximately 2ns apart within each output pulse. Each short pulse within the train gave the high focal spot intensity required to achieve high efficiency emission of keV x-rays. The first stage of the overall process involves the fabrication of x-ray mask patterns on 1 micron thick Si3N4 membranes using 3-beam lithography followed by gold electroplating. The second stage involves x-ray exposure of a chemically amplified resist through the mask patterns to produce interdigital electrode patterns with 0.1 micron linewidth. Helium background gas and thin polycarbonate/aluminum filters are employed to prevent debris particles from the laser-plasma source form reaching the exposed sample. A computer control system fires the laser and monitors the x-ray flux from the laser-plasma source to insure the desired x-ray exposure is achieved at the resist. In order to reduce diffusion effects in the chemically amplified resist during the post exposure bake the temperature had to be reduced from that normally used. Good reproduction of 0.1 micron linewidth patterns into the x-ray resist was obtained once the exposure parameters and post exposure bake were optimized. A compact exposure station using flowing helium at atmospheric pressure has also been developed for the process, alleviating the need for a vacuum chamber. The details of the overall process and the compact exposure station will be presented.

Optimization of Indium Bump Morphology for Improved Flip Chip Devices

NASA Technical Reports Server (NTRS)

Jones, Todd J.; Nikzad, Shouleh; Cunningham, Thomas J.; Blazejewski, Edward; Dickie, Matthew R.; Hoenk, Michael E.; Greer, Harold F.

2011-01-01

Flip-chip hybridization, also known as bump bonding, is a packaging technique for microelectronic devices that directly connects an active element or detector to a substrate readout face-to-face, eliminating the need for wire bonding. In order to make conductive links between the two parts, a solder material is used between the bond pads on each side. Solder bumps, composed of indium metal, are typically deposited by thermal evaporation onto the active regions of the device and substrate. While indium bump technology has been a part of the electronic interconnect process field for many years and has been extensively employed in the infrared imager industry, obtaining a reliable, high-yield process for high-density patterns of bumps can be quite difficult. Under the right conditions, a moderate hydrogen plasma exposure can raise the temperature of the indium bump to the point where it can flow. This flow can result in a desirable shape where indium will efficiently wet the metal contact pad to provide good electrical contact to the underlying readout or imager circuit. However, it is extremely important to carefully control this process as the intensity of the hydrogen plasma treatment dramatically affects the indium bump morphology. To ensure the fine-tuning of this reflow process, it is necessary to have realtime feedback on the status of the bumps. With an appropriately placed viewport in a plasma chamber, one can image a small field (a square of approximately 5 millimeters on each side) of the bumps (10-20 microns in size) during the hydrogen plasma reflow process. By monitoring the shape of the bumps in real time using a video camera mounted to a telescoping 12 magnifying zoom lens and associated optical elements, an engineer can precisely determine when the reflow of the bumps has occurred, and can shut off the plasma before evaporation or de-wetting takes place.

Spatial configuration of a plasma bunch formed under gyromagnetic resonance in a magnetic mirror trap

DOE Office of Scientific and Technical Information (OSTI.GOV)

Andreev, V. V.; Novitskii, A. A.; Umnov, A. M.

2016-06-15

The spatial configuration of a relativistic plasma bunch generated under the gyromagnetic autoresonance and confined in a magnetic mirror trap has been studied experimentally and numerically. The characteristics of bremsstrahlung generated by the plasma bunch from the gas and chamber walls were investigated using X-ray spectroscopy and radiometry, which made it possible to determine the localization of the bunch and analyze the dynamics of its confinement.

Plasma regenerated particulate trap and NO.sub.x reduction system

DOEpatents

Penetrante, Bernardino M.; Vogtlin, George E.; Merritt, Bernard T.; Brusasco, Raymond M.

2000-01-01

A non-catalytic two-stage process for removal of NO.sub.x and particulates from engine exhaust comprises a first stage that plasma converts NO to NO.sub.2 in the presence of O.sub.2 and hydrocarbons, and a second stage, which preferably occurs simultaneously with the first stage, that converts NO.sub.2 and carbon soot particles to respective environmentally benign gases that include N.sub.2 and CO.sub.2. By preconverting NO to NO.sub.2 in the first stage, the efficiency of the second stage for NO.sub.x reduction is enhanced while carbon soot from trapped particulates is simultaneously converted to CO.sub.2 when reacting with the NO.sub.2 (that converts to N.sub.2). For example, an internal combustion engine exhaust is connected by a pipe to a chamber where carbon-containing particulates are electrostatically trapped or filtered and a non-thermal plasma converts NO to NO.sub.2 in the presence of O.sub.2 and hydrocarbons. Volatile hydrocarbons (C.sub.x H.sub.y) from the trapped particulates are oxidized in the plasma and the remaining soot from the particulates reacts with the NO.sub.2 to convert NO.sub.2 to N.sub.2, and the soot to CO.sub.2. The nitrogen exhaust components remain in the gas phase throughout the process, with no accompanying adsorption.

Fractal structure of low-temperature plasma of arc discharge as a consequence of the interaction of current sheets

NASA Astrophysics Data System (ADS)

Smolanov, N. A.

2016-01-01

The structure of the particles deposited from the plasma arc discharge were studied. The flow of plasma spreading from the cathode spot to the walls of the vacuum chamber. Electric and magnetic fields to influence the plasma flow. The fractal nature of the particles from the plasma identified by small-angle X-ray scattering. Possible cause of their formation is due to the instability of the growth front and nonequilibrium conditions for their production - a high speed transition of the vapor-liquid-solid or vapor - crystal. The hypothesis of a plasma arc containing dust particles current sheets was proposed.

Plasma tests of sprayed coatings for rocket thrust chambers

NASA Technical Reports Server (NTRS)

Curren, A. N.; Love, W. K.

1974-01-01

Several plasma-sprayed coating systems were evaluated for structural stability in hydrogen plasma and in oxygen plasma mixed with hydrogen plasma. The principal test heat flux was 15 Btu per inch squared seconds. The system consisted of a number of thin 0.002 to 0.020 in. layers of metal oxides and/or metals. The principal materials included are molybdenum nichrome, alumina, and zirconia. The study identifies important factors in coating system fabrication and describes the durability of the coating systems in the test environments. Values of effective thermal conductivity for some of the systems are indicated.

The use of decompression to simulate the effect of extravehicular activity on human lymphocyte transformation

NASA Technical Reports Server (NTRS)

Meehan, R. T.; Duncan, U.; Neale, L.; Waligora, J.; Taylor, G. R.

1986-01-01

Lymphocytes from 35 subjects participating in a chamber study simulating extravehicular activity (EVA) conditions were studied. No significant differences in H3 thymidine uptake between pre chamber and post chamber response to any mitogens autologous plasma, or among circulating mononuclear cells by flow cytometry are observed. The studies could not identify the subjects who developed venous bubbles. Data from eight subjects suggests that acute stress associated with participating in the study augments in vitro lymphocyte proliferation. Results indicate EVA exposure does not greatly influence space-flight induced alterations in immune effector cell function.

Functionalization of Carbon Nanotubes

NASA Technical Reports Server (NTRS)

Khare, Bishun N. (Inventor); Meyyappan, Meyya (Inventor)

2007-01-01

Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H2, or F2, or CnHm) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, in a first chamber. The target particles are directed toward an array of CNTs located in a second chamber while suppressing transport of ultraviolet radiation to the second chamber. A CNT array is functionalized with the target particles, at or below room temperature, to a point of saturation, in an exposure time interval no longer than about 30 sec.

Functionalization of carbon nanotubes

NASA Technical Reports Server (NTRS)

Khare, Bishun N. (Inventor); Meyyappan, Meyya (Inventor)

2007-01-01

Method and system for functionalizing a collection of carbon nanotubes (CNTs). A selected precursor gas (e.g., H.sub.2 or F.sub.2 or C.sub.nH.sub.m) is irradiated to provide a cold plasma of selected target particles, such as atomic H or F, in a first chamber. The target particles are directed toward an array of CNTs located in a second chamber while suppressing transport of ultraviolet radiation to the second chamber. A CNT array is functionalized with the target particles, at or below room temperature, to a point of saturation, in an exposure time interval no longer than about 30 sec.

Laser-filamentation-induced water condensation and snow formation in a cloud chamber filled with different ambient gases.

PubMed

Liu, Yonghong; Sun, Haiyi; Liu, Jiansheng; Liang, Hong; Ju, Jingjing; Wang, Tiejun; Tian, Ye; Wang, Cheng; Liu, Yi; Chin, See Leang; Li, Ruxin

2016-04-04

We investigated femtosecond laser-filamentation-induced airflow, water condensation and snow formation in a cloud chamber filled respectively with air, argon and helium. The mass of snow induced by laser filaments was found being the maximum when the chamber was filled with argon, followed by air and being the minimum with helium. We also discussed the mechanisms of water condensation in different gases. The results show that filaments with higher laser absorption efficiency, which result in higher plasma density, are beneficial for triggering intense airflow and thus more water condensation and precipitation.

Di-p-xylylene polymer and method for making the same

DOEpatents

Jahn, Randy K.; Liepins, Raimond

1985-01-01

A method and apparatus for forming an improved poly-p-xylylene film. Solid di-para-xylylene dimer is sublimed in a sublimation furnace at approximately 100.degree. to 200.degree. C. and subsequently conducted to a pyrolysis furnace where it is pyrolyzed to the diradical p-xylylene monomer while in the vapor state at approximately 600 degrees C. The diradical monomer is then introduced into a deposition chamber for deposition onto a suitable substrate. The deposition chamber includes electrodes for producing a low pressure plasma through which the diradical monomer passes prior to deposition. The interaction of the diradical monomer with the low pressure plasma results in the formation of poly-p-xylylene film which is exceptionally hard and thermally stable.

Low-energy ion beam-based deposition of gallium nitride

DOE Office of Scientific and Technical Information (OSTI.GOV)

Vasquez, M. R., E-mail: mrvasquez@coe.upd.edu.ph; Wada, M.

2016-02-15

An ion source with a remote plasma chamber excited by a 13.56 MHz radio frequency power was used for low-energy broad ion beam extraction. Optical emission spectral analyses showed the sputtering and postionization of a liquid gallium (Ga) target placed in a chamber separated from the source bombarded by argon (Ar) plasma guided by a bent magnetic field. In addition, an E × B probe successfully showed the extraction of low-energy Ga and Ar ion beams using a dual-electrode extractor configuration. By introducing dilute amounts of nitrogen gas into the system, formation of thin Ga-based films on a silicon substratemore » was demonstrated as determined from X-ray diffraction and X-ray reflectivity studies.« less

Pressure and current effects on the thermal efficiency of an MPD arc used as a plasma source

NASA Technical Reports Server (NTRS)

Pivirotto, T. J.

1972-01-01

Measurements of arc voltage and energy loss to the cooled electrodes of a magnetoplasmadynamic (MPD) arc, operating without an applied magnetic field, were made at chamber pressures of 26 to 950 torr, argon mass flow rates of 0.08 to 44 g/s and current of 200 to 2000 A. The resulting arc thermal efficiency varied from 22% at a chamber pressure of 26 torr to 88% at 950 torr. Thermal efficiency was only weakly dependent on arc current. It is concluded that the MPD arc operating without an applied magnetic field and at higher pressure than normally used in thruster applications is a reliable and efficient steady-state plasma source.

A new HF-resistant tandem spray chamber for improved determination of trace elements and Pb isotopes using inductively coupled plasma-mass spectrometry

NASA Astrophysics Data System (ADS)

Krachler, Michael; Rausch, Nicole; Feuerbacher, Helmut; Klemens, Patrick

2005-07-01

The use of a new HF-resistant tandem spray chamber arrangement consisting of a cyclonic spray chamber and a Scott-type spray chamber made from PFA and PEEK provides a straightforward approach for improving the performance of inductively coupled-mass spectrometry (ICP-MS). The characteristics of the tandem spray chamber were critically evaluated against a PEEK cyclonic and a PFA Scott-type spray chamber, respectively. Sensitivity across the entire mass range was increased by about three times compared to the conventional setup utilizing only one spray chamber. Precision of the results, especially at low signal intensities, improved by 160% and 31% compared to the cyclonic and Scott-type spray chamber, respectively. Using the tandem spray chamber, the oxide formation rate was lowered by about 50%. Signals as low as 30 counts could be determined under routine measurement conditions with a RSD of 2.4% thus allowing to precisely quantify small concentration differences at the ng l - 1 concentration level. The excellent precision (0.02-0.07%) of 206Pb / 207Pb and 206Pb / 208Pb ratios determined in pore water samples was rather limited by the instrumental capabilities of the single collector ICP-MS instrument than by the performance of the tandem spray chamber.

Injection of auxiliary electrons for increasing the plasma density in highly charged and high intensity ion sources

DOE Office of Scientific and Technical Information (OSTI.GOV)

Odorici, F., E-mail: fabrizio.odorici@bo.infn.it; Malferrari, L.; Montanari, A.

Different electron guns based on cold- or hot-cathode technologies have been developed since 2009 at INFN for operating within ECR plasma chambers as sources of auxiliary electrons, with the aim of boosting the source performances by means of a higher plasma lifetime and density. Their application to microwave discharge ion sources, where plasma is not confined, has required an improvement of the gun design, in order to “screen” the cathode from the plasma particles. Experimental tests carried out on a plasma reactor show a boost of the plasma density, ranging from 10% to 90% when the electron guns are used,more » as explained by plasma diffusion models.« less

Determining the Concentrations and Temperatures of Products in a CF_4/CHF_3/N_2 Plasma via Submillimeter Absorption Spectroscopy

NASA Astrophysics Data System (ADS)

Helal, Yaser H.; Neese, Christopher F.; De Lucia, Frank C.; Ewing, Paul R.; Agarwal, Ankur; Craver, Barry; Stout, Phillip J.; Armacost, Michael D.

2017-06-01

Plasmas used for the manufacturing of semiconductor devices are similar in pressure and temperature to those used in the laboratory for the study of astrophysical species in the submillimeter (SMM) spectral region. The methods and technology developed in the SMM for these laboratory studies are directly applicable for diagnostic measurements in the semiconductor manufacturing industry. Many of the molecular neutrals, radicals, and ions present in processing plasmas have been studied and their spectra have been cataloged or are in the literature. In this work, a continuous wave, intensity calibrated SMM absorption spectrometer was developed as a remote sensor of gas and plasma species. A major advantage of intensity calibrated rotational absorption spectroscopy is its ability to determine absolute concentrations and temperatures of plasma species from first principles without altering the plasma environment. An important part of this work was the design of the optical components which couple 500-750 GHz radiation through a commercial inductively coupled plasma chamber. The measurement of transmission spectra was simultaneously fit for background and absorption signal. The measured absorption was used to calculate absolute densities and temperatures of polar species. Measurements for CHF_3, CF_2, FCN, HCN, and CN made in a CF_4/CHF_3/N_2 plasma will be presented. Temperature equilibrium among species will be shown and the common temperature is leveraged to obtain accurate density measurements for simultaneously observed species. The densities and temperatures of plasma species are studied as a function of plasma parameters, including flow rate, pressure, and discharge power.

System Configured For Applying Multiple Modifying Agents To A Substrate.

DOEpatents

Propp, W. Alan; Argyle, Mark D.; Janikowski, Stuart K.; Fox, Robert V.; Toth, William J.; Ginosar, Daniel M.; Allen, Charles A.; Miller, David L.

2005-11-08

The present invention is related to the modifying of substrates with multiple modifying agents in a single continuous system. At least two processing chambers are configured for modifying the substrate in a continuous feed system. The processing chambers can be substantially isolated from one another by interstitial seals. Additionally, the two processing chambers can be substantially isolated from the surrounding atmosphere by end seals. Optionally, expansion chambers can be used to separate the seals from the processing chambers.

System configured for applying multiple modifying agents to a substrate

DOEpatents

Propp, W. Alan; Argyle, Mark D.; Janikowski, Stuart K.; Fox, Robert V.; Toth, William J.; Ginosar, Daniel M.; Allen, Charles A.; Miller, David L.

2003-11-25

The present invention is related to the modifying of substrates with multiple modifying agents in a single continuous system. At least two processing chambers are configured for modifying the substrate in a continuous feed system. The processing chambers can be substantially isolated from one another by interstitial seals. Additionally, the two processing chambers can be substantially isolated from the surrounding atmosphere by end seals. Optionally, expansion chambers can be used to separate the seals from the processing chambers.

Accelerated recovery of Atlantic salmon (Salmo salar) from effects of crowding by swimming.

PubMed

Veiseth, Eva; Fjaera, Svein Olav; Bjerkeng, Bjørn; Skjervold, Per Olav

2006-07-01

The effects of post-crowding swimming velocity (0, 0.35, and 0.70 m/s) and recovery time (1.5, 6, and 12 h) on physiological recovery and processing quality parameters of adult Atlantic salmon (Salmo salar) were determined. Atlantic salmon crowded to a density similar to that of a commercial slaughter process (>200 kg/m(3), 40 min) were transferred to a swimming chamber for recovery treatment. Osmolality and concentrations of cortisol, glucose and lactate in blood plasma were used as physiological stress indicators, whereas image analyses of extent and duration of rigor contraction, and fillet gaping were used as measures of processing quality. Crowded salmon had a 5.8-fold higher plasma cortisol concentration than control salmon (P<0.05). The elevated plasma cortisol concentration was reduced by increasing the swimming velocity, and had returned to control levels after 6 h recovery at high water velocity. Similar effects of swimming velocity were observed for plasma osmolality and lactate concentration. A lower plasma glucose concentration was present in crowded than in control fish (P<0.05), although a typical post-stress elevation in plasma glucose was observed after the recovery treatments. Lower muscle pH was found in crowded compared with control salmon (P<0.05), but muscle pH returned to control levels after 6 h recovery at intermediate and high swimming velocities and after 12 h in the low velocity group. Crowding caused an early onset of rigor mortis contraction. However, subjecting crowded salmon to active swimming for 6 h before slaughter delayed the onset of rigor mortis contraction from 2.5 to 7.5 h post mortem. The extent of rigor mortis contraction was also affected by crowding and post-stress swimming activity (P<0.05), and the largest degree of contraction was found in crowded salmon. In conclusion, active swimming accelerated the return of plasma cortisol, hydromineral balance, and the energy metabolism of adult Atlantic salmon to pre-stress levels. Moreover, an active swimming period delayed the onset of rigor mortis contraction, which has a positive technological implication for the salmon processing industry.

Advanced solar-propelled cargo spacecraft for Mars missions

NASA Technical Reports Server (NTRS)

Auziasdeturenne, J.; Beall, M.; Burianek, J.; Cinniger, A.; Dunmire, B.; Haberman, E.; Iwamoto, J.; Johnson, S.; Mccracken, S.; Miller, M.

1989-01-01

At the University of Washington, three concepts for an unmanned, solar powered, cargo spacecraft for Mars-support missions have been investigated. These spacecraft are designed to carry a 50,000 kg payload from a low Earth orbit to a low Mars orbit. Each design uses a distinctly different propulsion system: a solar radiation absorption (SRA) system, a solar-pumped laser (SPL) system, and a solar powered mangetoplasmadynamic (MPD) arc system. The SRA directly converts solar energy to thermal energy in the propellant through a novel process developed at the University of Washington. A solar concentrator focuses sunlight into an absorption chamber. A mixture of hydrogen and potassium vapor absorbs the incident radiation and is heated to approximately 3700 K. The hot propellant gas exhausts through a nozzle to produce thrust. The SRA has an I(sub sp) of approximately 1000 sec and produces a thrust of 2940 N using two thrust chambers. In the SPL system, a pair of solar-pumped, multi-megawatt, CO2 lasers in sun-synchronous Earth orbit converts solar energy to laser energy. The laser beams are transmitted to the spacecraft via laser relay satellites. The laser energy heats the hydrogen propellant through a plasma breakdown process in the center of an absorption chamber. Propellant flowing through the chamber, heated by the plasma core, expands through a nozzle to produce thrust. The SPL has an I(sub sp) of 1285 sec and produces a thrust of 1200 N using two thrust chambers. The MPD system uses indium phosphide solar cells to convert sunlight to electricity, which powers the propulsion system. In this system, the argon propellant is ionized and electromagnetically accelerated by a magnetoplasmadynamic arc to produce thrust. The MPD spacecraft has an I(sub sp) of 2490 sec and produces a thrust of 100 N. Various orbital transfer options are examined for these concepts. In the SRA system, the mother ship transfers the payload into a very high Earth orbit and a small auxiliary propulsion system boosts the payload into a Hohmann transfer to Mars. The SPL spacecraft releases the payload as the spacecraft passes by Mars. Both the SRA-powered spacecraft and the SPL-powered spacecraft return to Earth for subsequent missions. The MPD-propelled spacecraft, however, remains at Mars as an orbiting space station. A patched conic approximation was used to determine a heliocentric interplanetary transfer orbit for the MPD propelled spacecraft. All three solar-powered spacecraft use an aerobrake procedure to place the payload into a low Mars parking orbit. The payload delivery times range from 160 days to 873 days (2.39 years).

Ultra-thin plasma radiation detector

DOEpatents

Friedman, Peter S.

2017-01-24

A position-sensitive ionizing-radiation counting detector includes a radiation detector gas chamber having at least one ultra-thin chamber window and an ultra-thin first substrate contained within the gas chamber. The detector further includes a second substrate generally parallel to and coupled to the first substrate and defining a gas gap between the first substrate and the second substrate. The detector further includes a discharge gas between the substrates and contained within the gas chamber, where the discharge gas is free to circulate within the gas chamber and between the first and second substrates at a given gas pressure. The detector further includes a first electrode coupled to one of the substrates and a second electrode electrically coupled to the first electrode. The detector further includes a first discharge event detector coupled to at least one of the electrodes for detecting a gas discharge counting event in the electrode.

Ultra-thin plasma panel radiation detector

DOE Office of Scientific and Technical Information (OSTI.GOV)

Friedman, Peter S.

An ultra-thin radiation detector includes a radiation detector gas chamber having at least one ultra-thin chamber window and an ultra-thin first substrate contained within the gas chamber. The detector further includes a second substrate generally parallel to and coupled to the first substrate and defining a gas gap between the first substrate and the second substrate. The detector further includes a discharge gas between the substrates and contained within the gas chamber, where the discharge gas is free to circulate within the gas chamber and between the first and second substrates at a given gas pressure. The detector further includesmore » a first electrode coupled to one of the substrates and a second electrode electrically coupled to the first electrode. The detector further includes a first discharge event detector coupled to at least one of the electrodes for detecting a gas discharge counting event in the electrode.« less

Sterilization of Long Tube Inner Surface Using Oxygen and Water Vapor Plasmas Produced by AC HV Discharge

NASA Astrophysics Data System (ADS)

Kitazaki, Satoshi; Hayashi, Nobuya

2009-10-01

Oxygen and water vapor plasmas inside a narrow long tube were produced using an AC HV glow discharge at low pressure in order to sterilize the inner surface of a tube. In order to produce plasma inside a narrow tube, an AC high voltage was adopted. The material of the tube used in this experiment was silicon rubber. The length and diameter of the tubes ranged from 300 to 1,000 mm and from 1 to 4 mm, respectively. The tube was placed in a stainless steel vacuum chamber and was evacuated to 10 Pa using a rotary pump. The material gas for plasma and radical productions was pure oxygen or water vapor, which was introduced to the chamber from a gas cylinder or water reservoir. Light emission spectral lines of oxygen and OH radicals were observed at 777 nm and 306 nm, respectively. The chemical indicator was inserted into the tube and turned to a yellowish color (from the original red) after a treatment, which indicates the generation of sufficient oxygen on OH radicals for sterilization. A tube with the length of 500 mm and diameter of 4 mm is sterilized using oxygen plasma by 10 minutes treatment. Also a tube with the length of 300 mm and diameter of 2 mm is sterilized using water vapor plasma by 5 minutes treatment.

Plasma processes for producing silanes and derivatives thereof

DOEpatents

Laine, Richard M; Massey, Dean Richard; Peterson, Peter Young

2014-03-25

The invention is generally related to process for generating one or more molecules having the formula Si.sub.xH.sub.y, Si.sub.xD.sub.y, Si.sub.xH.sub.yD.sub.z, and mixtures thereof, where x,y and z are integers .gtoreq.1, H is hydrogen and D is deuterium, such as silane, comprising the steps of: providing a silicon containing material, wherein the silicon containing material includes at least 20 weight percent silicon atoms based on the total weight of the silicon containing material; generating a plasma capable of vaporizing a silicon atom, sputtering a silicon atom, or both using a plasma generating device; and contacting the plasma to the silicon containing material in a chamber having an atmosphere that includes at least about 0.5 mole percent hydrogen atoms and/or deuterium atoms based on the total moles of atoms in the atmosphere; so that a molecule having the formula Si.sub.xH.sub.y; (e.g., silane) is generated. The process preferably includes a step of removing one or more impurities from the Si.sub.xH.sub.y (e.g., the silane) to form a clean Si.sub.xH.sub.y, Si.sub.xD.sub.y, Si.sub.xH.sub.yD.sub.z (e.g., silane). The process may also include a step of reacting the Si.sub.xH.sub.y, Si.sub.xD.sub.y, Si.sub.xH.sub.yD.sub.z (e.g., the silane) to produce a high purity silicon containing material such as electronic grade metallic silicon, photovoltaic grade metallic silicon, or both.

Laboratory simulation of field-aligned currents

NASA Technical Reports Server (NTRS)

Wessel, Frank J.; Rostoker, Norman

1993-01-01

A summary of progress during the period Apr. 1992 to Mar. 1993 is provided. Objectives of the research are (1) to simulate, via laboratory experiments, the three terms of the field-aligned current equation; (2) to simulate auroral-arc formation processes by configuring the boundary conditions of the experimental chamber and plasma parameters to produce highly localized return currents at the end of a field-aligned current system; and (3) to extrapolate these results, using theoretical and computational techniques, to the problem of magnetospheric-ionospheric coupling and to compare them with published literature signatures of auroral-arc phenomena.

Surface improvement of EPDM rubber by plasma treatment

NASA Astrophysics Data System (ADS)

Moraes, J. H.; da Silva Sobrinho, A. S.; Maciel, H. S.; Dutra, J. C. N.; Massi, M.; Mello, S. A. C.; Schreiner, W. H.

2007-12-01

The surface of ethylene-propylene-diene monomer (EPDM) rubber was treated in N2/Ar and N2/H2/Ar RF plasmas in order to achieve similar or better adhesion properties than NBR (acrylonitrile-butadiene) rubber, nowadays used as thermal protection of rocket chambers. The surface properties were studied by contact angle measurements and by x-ray photoelectron spectroscopy (XPS). The treated surfaces of the EPDM samples show a significant reduction in the contact angle measurement, indicating an increase in the surface energy. XPS analyses show the incorporation of polar nitrogen- and oxygen-containing groups on the rubber surface. After plasma treatment the presence of oxygen is observed due to surface oxidation which occurs when the samples are exposed to the air. Atomic force microscopy and scanning electron microscopy analyses indicate a decrease in the EPDM rubber surface roughness, promoted by surface etching during the plasma treatment. Strength tests indicate improvement of about 30% and 110% in the adhesion strength for the plasma treated EPDM/polyurethane liner interface and for the EPDM/epoxy adhesive interface, respectively. The adhesion strength of the EPDM/liner is similar to that obtained for the NBR/liner, which indicates that EPDM rubber can safely be used as thermal protection of the solid propellant rocket chamber.

Mass spectrometric studies of SiO2 deposition in an indirect plasma enhanced LPCVD system

NASA Technical Reports Server (NTRS)

Iyer, R.; Lile, D. L.; Mcconica, C. M.

1993-01-01

Reaction pathways for the low temperature deposition of SiO2 from silane and indirect plasma-excited oxygen-nitrogen mixtures are proposed based on experimental evidence gained from mass spectrometry in an indirect plasma enhanced chemical vapor deposition chamber. It was observed that about 80-85 percent of the silane was oxidized to byproduct hydrogen and only about 15-20 percent to water. Such conversion levels have led us to interpret that silanol (SiH3OH) could be the precursor for SiO2 film deposition, rather than siloxane /(SiH3)2O/ which has generally been cited in the literature. From mass spectrometry, we have also shown the effects of the plasma, and of mixing small amounts of N2 with the oxygen flow, in increasing the deposition rate of SiO2. Free radical reaction of nitric oxide, synthesized from the reaction of oxygen and nitrogen in the plasma chamber, and an *ncrease in atomic oxygen concentration, are believed to be the reasons for these SiO2 deposition rate increases. Through mass spectrometry we have, in addition, been able to identify products, presumably originating from terminating reactions, among a sequence of chemical reactions proposed for the deposition of SiO2.

A new H{sub 2}{sup +} source: Conceptual study and experimental test of an upgraded version of the VIS—Versatile ion source

DOE Office of Scientific and Technical Information (OSTI.GOV)

Castro, G., E-mail: Giuseppe.Castro@lns.infn.it; Celona, L.; Mascali, D.

2016-08-15

The versatile ion source is an off-resonance microwave discharge ion source which produces a slightly overdense plasma at 2.45 GHz of pumping wave frequency extracting more than 60 mA proton beams and 50 mA He{sup +} beams. DAEδALUS and IsoDAR experiments require high intensities for H{sub 2}{sup +} beams to be accelerated by high power cyclotrons for neutrinos generation. In order to fulfill the new requirements, a new plasma chamber and injection system has been designed and manufactured for increasing the H{sub 2}{sup +} beam intensity. In this paper the studies for the increasing of the H{sub 2}{sup +}/p ratiomore » and for the design of the new plasma chamber and injection system will be shown and discussed together with the experimental tests carried out at Istituto Nazionale di Fisica Nucleare-Laboratori Nazionali del Sud (INFN-LNS) and at Best Cyclotron Systems test-bench in Vancouver, Canada.« less