Torsional actuator motor using solid freeform fabricated PZT ceramics

NASA Astrophysics Data System (ADS)

Kim, Chulho; Wu, Carl C. M.; Bender, Barry

2004-07-01

A torsional actuator has been developed at NRL utilizing the high piezoelectric shear coefficient, d15. This torsional actuator uses an even number of alternately poled segments of electroactive PZT. Under an applied electric field, the torsional actuator produces large angular displacement and a high torque. The solid freeform fabrication technique of the laminated object manufacturing (LOM) is used for rapid prototyping of torsional actuator with potential cost and time saving. First step to demonstrate the feasibility of the LOM technique for the torsional actuator device fabrication is to make near net shape segments. We report a prototype PZT torsional actuator using LOM prepared PZT-5A segments. Fabrication processes and test results are described. The torsional actuator PZT-5A tube has dimensions of 13 cm long, 2.54 cm OD and 1.9 cm ID. Although the piezoelectric strain is small, it may be converted into large displacement via accumulation of the small single cycle displacements over many cycles using AC driving voltage such as with a rotary 'inchworm' actuator or an ultrasonic rotary motor. A working prototype of a full-cycle motor driven by the piezoelectric torsional actuator has been achieved. The rotational speed is 1,200 rpm under 200 V/cm field at the resonant frequency of 4.5 kHz.

Optimum Operating Conditions for PZT Actuators for Vibrotactile Wearables

NASA Astrophysics Data System (ADS)

Logothetis, Irini; Matsouka, Dimitra; Vassiliadis, Savvas; Vossou, Clio; Siores, Elias

2018-04-01

Recently, vibrotactile wearables have received much attention in fields such as medicine, psychology, athletics and video gaming. The electrical components presently used to generate vibration are rigid; hence, the design and creation of ergonomical wearables are limited. Significant advances in piezoelectric components have led to the production of flexible actuators such as piezoceramic lead zirconate titanate (PZT) film. To verify the functionality of PZT actuators for use in vibrotactile wearables, the factors influencing the electromechanical conversion were analysed and tested. This was achieved through theoretical and experimental analyses of a monomorph clamped-free structure for the PZT actuator. The research performed for this article is a three-step process. First, a theoretical analysis presents the equations governing the actuator. In addition, the eigenfrequency of the film was analysed preceding the experimental section. For this stage, by applying an electric voltage and varying the stimulating electrical characteristics (i.e., voltage, electrical waveform and frequency), the optimum operating conditions for a PZT film were determined. The tip displacement was measured referring to the mechanical energy converted from electrical energy. From the results obtained, an equation for the mechanical behaviour of PZT films as actuators was deduced. It was observed that the square waveform generated larger tip displacements. In conjunction with large voltage inputs at the predetermined eigenfrequency, the optimum operating conditions for the actuator were achieved. To conclude, PZT films can be adapted to assist designers in creating comfortable vibrotactile wearables.

Optimum Operating Conditions for PZT Actuators for Vibrotactile Wearables

NASA Astrophysics Data System (ADS)

Logothetis, Irini; Matsouka, Dimitra; Vassiliadis, Savvas; Vossou, Clio; Siores, Elias

2018-07-01

Recently, vibrotactile wearables have received much attention in fields such as medicine, psychology, athletics and video gaming. The electrical components presently used to generate vibration are rigid; hence, the design and creation of ergonomical wearables are limited. Significant advances in piezoelectric components have led to the production of flexible actuators such as piezoceramic lead zirconate titanate (PZT) film. To verify the functionality of PZT actuators for use in vibrotactile wearables, the factors influencing the electromechanical conversion were analysed and tested. This was achieved through theoretical and experimental analyses of a monomorph clamped-free structure for the PZT actuator. The research performed for this article is a three-step process. First, a theoretical analysis presents the equations governing the actuator. In addition, the eigenfrequency of the film was analysed preceding the experimental section. For this stage, by applying an electric voltage and varying the stimulating electrical characteristics (i.e., voltage, electrical waveform and frequency), the optimum operating conditions for a PZT film were determined. The tip displacement was measured referring to the mechanical energy converted from electrical energy. From the results obtained, an equation for the mechanical behaviour of PZT films as actuators was deduced. It was observed that the square waveform generated larger tip displacements. In conjunction with large voltage inputs at the predetermined eigenfrequency, the optimum operating conditions for the actuator were achieved. To conclude, PZT films can be adapted to assist designers in creating comfortable vibrotactile wearables.

Reversible Solid Adhesion for Defense Applications

DTIC Science & Technology

2008-01-31

sensitive. Referring to Fig. 2(a), using the two closed-loop piezoelectric ( PZT ) actuators, the vertical and horizontal velocities of the...approaching/retracting contacting surfaces can be independently controlled. The displacement resolution of the vertical PZT actuator is 0.6 nm, and the total...interfacial forces are measured using the prototype custom-made capacity-type force transducer which is attached directly on the upper PZT actuator. In order

Large aperture deformable mirror with a transferred single-crystal silicon membrane actuated using large-stroke PZT Unimorph Actuators

NASA Technical Reports Server (NTRS)

Hishinumat, Yoshikazu; Yang, Eui - Hyeok (EH)

2005-01-01

We have demonstrated a large aperture (50 mm x 50 mm) continuous membrane deformable mirror (DM) with a large-stroke piezoelectric unimorph actuator array. The DM consists of a continuous, large aperture, silicon membrane 'transferred' in its entirety onto a 20 x 20 piezoelectric unimorph actuator array. A PZT unimorph actuator, 2.5 mm in diameter with optimized PZT/Si thickness and design showed a deflection of 5.7 [m at 20V. An assembled DM showed an operating frequency bandwidth of 30 kHz and influence function of approximately 30%.

Longitudinal-bending mode micromotor using multilayer piezoelectric actuator.

PubMed

Yao, K; Koc, B; Uchino, K

2001-07-01

Longitudinal-bending mode ultrasonic motors with a diameter of 3 mm were fabricated using stacked multilayer piezoelectric actuators, which were self-developed from hard lead zirconate titanate (PZT) ceramic. A bending vibration was converted from a longitudinal vibration with a longitudinal-bending coupler. The motors could be bidirectionally operated by changing driving frequency. Their starting and braking torque were analyzed based on the transient velocity response. With a load of moment of inertia 2.5 x 10(-7) kgm2, the motor showed a maximum starting torque of 127.5 microNm. The braking torque proved to be a constant independent on the motor's driving conditions and was roughly equivalent to the maximum starting torque achievable with our micromotors.

Anisotropic Laminar Piezocomposite Actuator Incorporating Machined PMN-PT Single Crystal Fibers

NASA Technical Reports Server (NTRS)

Wilkie, W. Keats; Inman, Daniel J.; Lloyd, Justin M.; High, James W.

2006-01-01

The design, fabrication, and testing of a flexible, laminar, anisotropic piezoelectric composite actuator utilizing machined PMN-32%PT single crystal fibers is presented. The device consists of a layer of rectangular single crystal piezoelectric fibers in an epoxy matrix, packaged between interdigitated electrode polyimide films. Quasistatic free-strain measurements of the single crystal device are compared with measurements from geometrically identical specimens incorporating polycrystalline PZT-5A and PZT-5H piezoceramic fibers. Free-strain actuation of the single crystal actuator at low bipolar electric fields (+/- 250 V/mm) is approximately 400% greater than that of the baseline PZT-5A piezoceramic device, and 200% greater than that of the PZT-5H device. Free-strain actuation under high unipolar electric fields (0-4kV/mm) is approximately 200% of the PZT-5A baseline device, and 150% of the PZT-5H alternate piezoceramic device. Performance increases at low field are qualitatively consistent with predicted increases based on scaling the low-field d33 piezoelectric constants of the respective piezoelectric materials. High-field increases are much less than scaled d33 estimates, but appear consistent with high-field freestrain measurements reported for similar bulk single-crystal and piezoceramic compositions. Measurements of single crystal actuator capacitance and coupling coefficient are also provided. These properties were poorly predicted using scaled bulk material dielectric and coupling coefficient data. Rules-of-mixtures calculations of the effective elastic properties of the single crystal device and estimated actuation work energy densities are also presented. Results indicate longitudinal stiffnesses significantly lower (50% less) than either piezoceramic device. This suggests that single-crystal piezocomposite actuators will be best suited to low induced-stress, high strain and deflection applications.

Anisotropic Piezocomposite Actuator Incorporating Machined PMN-PT Single Crystal Fibers

NASA Technical Reports Server (NTRS)

Wilkie, W. Keats; Inman, Daniel J.; Lloyd, Justin M.; High, James W.

2004-01-01

The design, fabrication, and testing of a flexible, planar, anisotropic piezoelectric composite actuator utilizing machined PMN-32%PT single crystal fibers is presented. The device consists of a layer of rectangular single crystal piezoelectric fibers in an epoxy matrix, packaged between interdigitated electrode polyimide films. Quasistatic free-strain measurements of the single crystal device are compared with measurements from geometrically identical specimens incorporating polycrystalline PZT-5A and PZT-5H piezoceramic fibers. Free-strain actuation of the single crystal actuator at low bipolar electric fields (+/- 250 V/mm) is approximately 400% greater than that of the baseline PZT-5A piezoceramic device, and 200% greater than that of the PZT-5H device. Free-strain actuation under high unipolar electric fields (0-4kV/mm) is approximately 200% of the PZT-5A baseline device, and 150% of the PZT-5H alternate piezoceramic device. Performance increases at low field are qualitatively consistent with predicted increases based on scaling the low-field d(sub 33) piezoelectric constants of the respective piezoelectric materials. High-field increases are much less than scaled d(sub 33) estimates, but appear consistent with high-field freestrain measurements reported for similar bulk single-crystal and piezoceramic compositions. Measurements of single crystal actuator capacitance and coupling coefficient are also provided. These properties were poorly predicted using scaled bulk material dielectric and coupling coefficient data. Rules-of-mixtures calculations of the effective elastic properties of the single crystal device and estimated actuation work energy densities are also presented. Results indicate longitudinal stiffnesses significantly lower (50% less) than either piezoceramic device. This suggests that single-crystal piezocomposite actuators will be best suited to low induced-stress, high strain and deflection applications.

A Model of the THUNDER Actuator

NASA Technical Reports Server (NTRS)

Curtis, Alan R. D.

1997-01-01

A THUNDER actuator is a composite of three thin layers, a metal base, a piezoelectric wafer and a metal top cover, bonded together under pressure and at high temperature with the LaRC SI polyimid adhesive. When a voltage is applied between the metal layers across the PZT the actuator will bend and can generate a force. This document develops and describes an analytical model the transduction properties of THUNDER actuators. The model development is divided into three sections. First, a static model is described that relates internal stresses and strains and external displacements to the thermal pre-stress and applied voltage. Second, a dynamic energy based model is described that allows calculation of the resonance frequencies, developed force and electrical input impedance. Finally, a fully coupled electro-mechanical transducer model is described. The model development proceeds by assuming that both the thermal pre-stress and the piezoelectric actuation cause the actuator to deform in a pure bend in a single plane. It is useful to think of this as a two step process, the actuator is held flat, differential stresses induce a bending moment, the actuator is released and it bends. The thermal pre-stress is caused by the different amounts that the constituent layers shrink due to their different coefficients of thermal expansion. The adhesive between layers sets at a high temperature and as the actuator cools, the metal layers shrink more than the PZT. The PZT layer is put into compression while the metal layers are in tension. The piezoelectric actuation has a similar effect. An applied voltage causes the PZT layer to strain, which in turn strains the two metal layers. If the PZT layer expands it will put the metal layers into tension and PZT layer into compression. In both cases, if shear force effects are neglected, the actuator assembly will experience a uniform in-plane strain. As the materials each have a different elastic modulus, different stresses will develop in each layer and these stresses will induce a bending moment. When the actuator is released from its flat configuration, the differential stresses are relieved as the actuator bends.

Static/dynamic trade-off performance of PZT thick film micro-actuators

NASA Astrophysics Data System (ADS)

Bienaimé, Alex; Chalvet, Vincent; Clévy, Cédric; Gauthier-Manuel, Ludovic; Baron, Thomas; Rakotondrabe, Micky

2015-07-01

Piezoelectric actuators are widespread in the design of micro/nanorobotic tools and microsystems. Studies toward the integration of such actuators in complex micromechatronic systems require the size reduction of these actuators while retaining a wide range of performance. Two main fabrication processes are currently used for the fabrication of piezoelectric actuators, providing very different behaviors: (i) the use of a bulk lead zirconate titanate (PZT) layer and (ii) the use of thin film growth. In this paper, we propose a trade-off between these two extreme processes and technologies in order to explore the performance of new actuators. This resulted in the design and fabrication of thick film PZT unimorph cantilevers. They allowed a high level of performance, both in the static (displacement) and dynamic (first resonance frequency) regimes, in addition to being small in size. Such cantilever sizes are obtained through the wafer scale bonding and thinning of a PZT plate onto a silicon on insulator wafer. The piezoelectric cantilevers have a 26 μm thick PZT layer with a 5 μm thick silicon layer, over a length of 4 mm and a width of 150 μm. Experimental characterization has shown that the static displacements obtained are in excess of 4.8 μm V-1 and the resonance frequencies are up to 1103 Hz, which are useful for large displacements and low voltage actuators.

Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

NASA Astrophysics Data System (ADS)

Kim, Sung-Jin; Cho, Young-Ho; Nam, Hyo-Jin; Bu, Jong Uk

2008-12-01

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators, detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested the prototypes of TMDs for single-axis and dual-axis rotations, respectively. The single-axis TMD generates a static rotational angle of 6.1° at 16 Vdc, which is six times larger than that of the single-axis TMA, 0.9°. However, the rotational response curve of TMD shows hysteresis and zero offset due to the static friction from the initial contact force between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is reduced by eliminating the initial contact force of the PZT actuator. The dual-axis TMD generates static rotational angles of 5.5° and 4.7° in the x-axis and y-axis, respectively, at 16 Vdc. The measured resonant frequencies of the dual-axis TMD are 2.1 ± 0.1 kHz in the x-axis and 1.7 ± 0.1 kHz in the y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by the 16 Vp-p sinusoidal wave signal at room temperature.

Note: Resonance magnetoelectric interactions in laminate of FeCuNbSiB and multilayer piezoelectric stack for magnetic sensor

NASA Astrophysics Data System (ADS)

Li, Jianqiang; Lu, Caijiang; Xu, Changbao; Zhong, Ming

2015-09-01

This paper develops a simple miniature magnetoelectric (ME) laminate FeCuNbSiB/PZT-stack made up of magnetostrictive Fe73.5Cu1Nb3Si13.5B9 (FeCuNbSiB) foils and piezoelectric Pb(Zr, Ti)O3 (PZT) multilayer stack vibrator. Resonant ME interactions of FeCuNbSiB/PZT-stack with different layers of FeCuNbSiB foil (L) are investigated in detail. The experimental results show that the ME voltage coefficient reaches maximum value of 141.5 (V/cm Oe) for FeCuNbSiB/PZT-stack with L = 6. The AC-magnetic sensitivities can reach 524.29 mV/Oe and 1.8 mV/Oe under resonance 91.6 kHz and off-resonance 1 kHz, respectively. The FeCuNbSiB/PZT-stack can distinguish small dc-magnetic field of ˜9 nT. The results indicate that the proposed ME composites are very promising for the cheap room-temperature magnetic field sensing technology.

Uncertainty quantification for PZT bimorph actuators

NASA Astrophysics Data System (ADS)

Bravo, Nikolas; Smith, Ralph C.; Crews, John

2018-03-01

In this paper, we discuss the development of a high fidelity model for a PZT bimorph actuator used for micro-air vehicles, which includes the Robobee. We developed a high-fidelity model for the actuator using the homogenized energy model (HEM) framework, which quantifies the nonlinear, hysteretic, and rate-dependent behavior inherent to PZT in dynamic operating regimes. We then discussed an inverse problem on the model. We included local and global sensitivity analysis of the parameters in the high-fidelity model. Finally, we will discuss the results of Bayesian inference and uncertainty quantification on the HEM.

Self-Balancing, Optical-Center-Pivot, Fast-Steering Mirror

NASA Technical Reports Server (NTRS)

Moore, James D.; Carson, Johnathan W.

2011-01-01

A complete, self-contained fast-steering- mirror (FSM) mechanism is reported consisting of a housing, a mirror and mirror-mounting cell, three PZT (piezoelectric) actuators, and a counterbalance mass. Basically, it is a comparatively stiff, two-axis (tip-tilt), self-balanced FSM. The present invention requires only three (or three pairs for flight redundancy) actuators. If a PZT actuator degrades, the inherent balance remains, and compensation for degraded stroke is made by simply increasing the voltage to the PZT. Prior designs typically do not pivot at the mirror optical center, creating unacceptable beam shear.

CHARACTERIZATION OF POLED SINGLE-LAYER PZT FOR PIEZO STACK IN FUEL INJECTION SYSTEM

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Hong; Matsunaga, Tadashi; Lin, Hua-Tay

2010-01-01

Poled single-layer PZT has been characterized in as-extracted and as-received states. PZT plate specimens in the former were extracted from a stack. Flexure strength of PZT was evaluated by using ball-on-ring and 4-point bend tests. Fractography showed that intergranular fractures dominated the fracture surface and that volume pores were the primary strength-limiting flaws. The electric field effect was investigated by testing the PZT in open circuit and coercive field levels. An asymmetrical response on the biaxial flexure strength with respect to the electric field direction was observed. These experimental results will assist reliability design of the piezo stack that ismore » being considered in fuel injection system.« less

A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator.

PubMed

Koh, Kah How; Kobayashi, Takeshi; Lee, Chengkuo

2011-07-18

A novel dynamic excitation of an S-shaped PZT piezoelectric actuator, which is conceptualized by having two superimposed AC voltages, is characterized in this paper through the evaluation of the 2-D scanning characteristics of an integrated silicon micromirror. The device is micromachined from a SOI wafer with a 5 μm thick Si device layer and multilayers of Pt/Ti/PZT//Pt/Ti deposited as electrode and actuation materials. A large mirror (1.65 mm x 2mm) and an S-shaped PZT actuator are formed after the backside release process. Three modes of operation are investigated: bending, torsional and mixed. The resonant frequencies obtained for bending and torsional modes are 27Hz and 70Hz respectively. The maximum measured optical deflection angles obtained at 3Vpp are ± 38.9° and ± 2.1° respectively for bending and torsional modes. Various 2-D Lissajous patterns are demonstrated by superimposing two ac sinusoidal electrical signals of different frequencies (27 Hz and 70 Hz) into one signal to be used to actuate the mirror.

A fatigue test method for Pb(Zr,Ti)O3 thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

NASA Astrophysics Data System (ADS)

Kobayashi, T.; Maeda, R.; Itoh, T.

2008-11-01

In the present study, we propose a new method for the fatigue test of lead zirconate titanate (PZT) thin films for MEMS devices by using self-sensitive piezoelectric microcantilevers developed in our previous study. We have deposited PZT thin films on SOI wafers and fabricated the microcantilevers through the MEMS microfabrication process. In the self-sensitive piezoelectric microcantilevers, the PZT thin films are separated in order to act as an actuator and a sensor. The fatigue characteristic of the PZT thin films can be evaluated by measuring the output voltage of the sensor as a function of time. When a sine wave of 20 Vpp and a dc bias of 10 V were applied to the PZT thin films for an actuator, the output voltage of the sensor fell down after 107 fatigue cycles. We have also investigated the influence of amplitude of the actuation sine wave and dc bias on the fatigue of the PZT thin films by using the proposed fatigue test method.

Fabrication of lead zirconate titanate actuator via suspension polymerization casting

NASA Astrophysics Data System (ADS)

Miao, Weiguo

2000-10-01

The research presented herein has focused on the fabrication of a lead zirconate titanate (PZT) telescopic actuator from Suspension Polymerization Casting (SPC). Two systems were studied: an acrylamide-based hydrogel, and an acrylate-based nonaqueous system. Analytical tools such as thermomechanical analysis (TMA), differential scanning calorimetry (DSC), chemorheology, thermogravimetric analysis (TGA), and differential thermal analysis (DTA) were used to investigate the polymerization and burnout processes. The acrylamide hydrogel polymerization casting process used hydroxymethyl acrylamide (HMAM) monofunctional monomer with methylenebisacrylamide (MBAM) difunctional monomer, or used methacrylamide (MAM) as monofunctional monomer. High solid loading PZT slurries with low viscosities were obtained by optimizing the amounts of dispersant and the PZT powders. The overall activation energy of gelation was calculated to be 60--76 kJ/mol for the monomer solution, this energy was increased to 91 kJ/mol with the addition of PZT powder. The results show that the PZT powder has a retardation effect on gelation. Although several PZT tubes were made using the acrylamide-based system, the demolding and drying difficulties made this process unsuitable for building internal structures, such as the telescopic actuator. The acrylate-based system was used successfully to build telescopic actuator. Efforts were made to study the influence of composition and experimental conditions on the polymerization process. Temperature was found to have the largest impact on polymerization. To adjust the polymerization temperature and time, initiator and/or catalyst were used. PZT powder has a catalytic effect on the polymerization process. Compared with acrylamide systems, acrylate provided a strong polymer network to support the ceramic green body. This high strength is beneficial for the demolding process, but it can easily cause cracks during the burnout process. To solve the burnout issue, non-reactive decalin was used as a solvent to lower the stress inside the green body. The addition of decalin has no large impact on the polymerization process. With 15 wt% decalin in the monomer solution, the burnout process was successfully solved. The burnout process was monitored by TGA/DTA and TMA. A 51 vol% PZT filled acrylate slurry was cast into a mold made by Stereolithography (SLA), and after curing, the telescopic actuator was removed from the mold. This indirect SLA method provides an efficient way to build ceramic parts. PZT samples were sintered at 1275°C for 4 hours, with density over 98%. SEM analysis showed the sample made by SPC has a uniform microstructure, which may be beneficial to the electric properties. The sample made by polymerization has a d33 value about 680 pm/V, which is better than the literature value (580 pm/V). The electric tests showed this telescopic actuator produced a maximum deflection of 24.7 mum at 250 kV/m, in line with theoretical calculations. Compared with actuators made by other methods, the actuator made by SPC provides a comparable structural factor (187.5). The distortion in actuators is caused by fabrication and sintering.

Design and experimental evaluation of flextensional-cantilever based piezoelectric transducers for flow energy harvesting

NASA Astrophysics Data System (ADS)

Lee, Hyeong Jae; Sherrit, Stewart; Tosi, Luis Phillipe; Colonius, Tim

2016-04-01

Cantilever type piezoelectric harvesters, such as bimorphs, are typically used for vibration induced energy harvesting. However, a major drawback of a piezoelectric bimorph is its brittle nature in harsh environments, precipitating short life-times as well as output power degradation. The emphasis in this work is to design robust, highly efficient piezoelectric harvesters that are capable of generating electrical power in the milliwatt range. Various harvesters were modeled, designed and prototyped, and the flextensional actuator based harvester, where the metal cantilever is mounted and coupled between two flextensional actuators, was found to be a viable alternative to the cantilever type piezoelectric harvesters. Preliminary tests show that these devices equipped with 5x5x36 mm two piezoelectric PZT stacks can produce greater than 50 mW of power under air flow induced vibrations.

Theoretical calculations and performance results of a PZT thin film actuator.

PubMed

Hoffmann, Marcus; Küppers, Hartmut; Schneller, Theodor; Böttger, Ulrich; Schnakenberg, Uwe; Mokwa, Wilfried; Waser, Rainer

2003-10-01

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 microm, the actuator was designed with a cantilever length of 300 microm to 1000 microm. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)- and capacitance-voltage C(V)-measurements were carried out.

Performance of PZT stacks under high-field electric cycling at various temperatures in heavy-duty diesel engine fuel injectors

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Hong; Lin, Hua-Tay; Stafford, Mr Randy

2016-01-01

Testing and characterization of large prototype lead zirconate titanate (PZT) stacks present substantial technical challenges to electronic systems. The work in this study shows that an alternative approach can be pursued by using subunits extracted from prototype stacks. Piezoelectric and dielectric integrity was maintained even though the PZT plate specimens experienced an additional loading process involved with the extraction after factory poling. Extracted 10-layer plate specimens were studied by an electric cycle test under an electric field of 3.0/0.0 kV/mm, 100 Hz to 108 cycles, both at room temperature (22 C) and at 50 C. The elevated temperature had amore » defined impact on the fatigue of PZT stacks. About 48 and 28% reductions were observed in the piezoelectric and dielectric coefficients, respectively, after 108 cycles at 50 C, compared with reductions of 25 and 15% in the respective coefficients at 22 C. At the same time, the loss tangent varied to a limited extent. The evolution of PZT electrode interfacial layers or nearby dielectric layers should account for the difference in the fatigue rates of piezoelectric and dielectric coefficients. But the basic contribution to observed fatigue may result from the buildup of a bias field that finally suppressed the motion of the domain walls. Finally, monitoring of dielectric coefficients can be an effective tool for on-line lifetime prediction of PZT stacks in service if a failure criterion is defined properly.« less

Performance of PZT stacks under high-field electric cycling at various temperatures in heavy-duty diesel engine fuel injectors

NASA Astrophysics Data System (ADS)

Wang, Hong; Lee, Sung-Min; Lin, Hua-Tay; Stafford, Randy

2016-04-01

Testing and characterization of large prototype lead zirconate titanate (PZT) stacks present substantial technical challenges to electronic systems. The work in this study shows that an alternative approach can be pursued by using subunits extracted from prototype stacks. Piezoelectric and dielectric integrity was maintained even though the PZT plate specimens experienced an additional loading process involved with the extraction after factory poling. Extracted 10-layer plate specimens were studied by an electric cycle test under an electric field of 3.0/0.0 kV/mm, 100 Hz to 108 cycles, both at room temperature (22°C) and at 50°C. The elevated temperature had a defined impact on the fatigue of PZT stacks. About 48 and 28% reductions were observed in the piezoelectric and dielectric coefficients, respectively, after 108 cycles at 50°C, compared with reductions of 25 and 15% in the respective coefficients at 22°C. At the same time, the loss tangent varied to a limited extent. The evolution of PZT-electrode interfacial layers or nearby dielectric layers should account for the difference in the fatigue rates of piezoelectric and dielectric coefficients. But the basic contribution to observed fatigue may result from the buildup of a bias field that finally suppressed the motion of the domain walls. Finally, monitoring of dielectric coefficients can be an effective tool for on-line lifetime prediction of PZT stacks in service if a failure criterion is defined properly.

Optimization of Sensing and Feedback Control for Vibration/Flutter of Rotating Disk by PZT Actuators via Air Coupled Pressure

PubMed Central

Yan, Tianhong; Xu, Xinsheng; Han, Jianqiang; Lin, Rongming; Ju, Bingfeng; Li, Qing

2011-01-01

In this paper, a feedback control mechanism and its optimization for rotating disk vibration/flutter via changes of air-coupled pressure generated using piezoelectric patch actuators are studied. A thin disk rotates in an enclosure, which is equipped with a feedback control loop consisting of a micro-sensor, a signal processor, a power amplifier, and several piezoelectric (PZT) actuator patches distributed on the cover of the enclosure. The actuator patches are mounted on the inner or the outer surfaces of the enclosure to produce necessary control force required through the airflow around the disk. The control mechanism for rotating disk flutter using enclosure surfaces bonded with sensors and piezoelectric actuators is thoroughly studied through analytical simulations. The sensor output is used to determine the amount of input to the actuator for controlling the response of the disk in a closed loop configuration. The dynamic stability of the disk-enclosure system, together with the feedback control loop, is analyzed as a complex eigenvalue problem, which is solved using Galerkin’s discretization procedure. The results show that the disk flutter can be reduced effectively with proper configurations of the control gain and the phase shift through the actuations of PZT patches. The effectiveness of different feedback control methods in altering system characteristics and system response has been investigated. The control capability, in terms of control gain, phase shift, and especially the physical configuration of actuator patches, are also evaluated by calculating the complex eigenvalues and the maximum displacement produced by the actuators. To achieve a optimal control performance, sizes, positions and shapes of PZT patches used need to be optimized and such optimization has been achieved through numerical simulations. PMID:22163788

Optimization of sensing and feedback control for vibration/flutter of rotating disk by PZT actuators via air coupled pressure.

PubMed

Yan, Tianhong; Xu, Xinsheng; Han, Jianqiang; Lin, Rongming; Ju, Bingfeng; Li, Qing

2011-01-01

In this paper, a feedback control mechanism and its optimization for rotating disk vibration/flutter via changes of air-coupled pressure generated using piezoelectric patch actuators are studied. A thin disk rotates in an enclosure, which is equipped with a feedback control loop consisting of a micro-sensor, a signal processor, a power amplifier, and several piezoelectric (PZT) actuator patches distributed on the cover of the enclosure. The actuator patches are mounted on the inner or the outer surfaces of the enclosure to produce necessary control force required through the airflow around the disk. The control mechanism for rotating disk flutter using enclosure surfaces bonded with sensors and piezoelectric actuators is thoroughly studied through analytical simulations. The sensor output is used to determine the amount of input to the actuator for controlling the response of the disk in a closed loop configuration. The dynamic stability of the disk-enclosure system, together with the feedback control loop, is analyzed as a complex eigenvalue problem, which is solved using Galerkin's discretization procedure. The results show that the disk flutter can be reduced effectively with proper configurations of the control gain and the phase shift through the actuations of PZT patches. The effectiveness of different feedback control methods in altering system characteristics and system response has been investigated. The control capability, in terms of control gain, phase shift, and especially the physical configuration of actuator patches, are also evaluated by calculating the complex eigenvalues and the maximum displacement produced by the actuators. To achieve a optimal control performance, sizes, positions and shapes of PZT patches used need to be optimized and such optimization has been achieved through numerical simulations.

Characterization of low-mass deformable mirrors and ASIC drivers for high-contrast imaging

NASA Astrophysics Data System (ADS)

Mejia Prada, Camilo; Yao, Li; Wu, Yuqian; Roberts, Lewis C.; Shelton, Chris; Wu, Xingtao

2017-09-01

The development of compact, high performance Deformable Mirrors (DMs) is one of the most important technological challenges for high-contrast imaging on space missions. Microscale Inc. has fabricated and characterized piezoelectric stack actuator deformable mirrors (PZT-DMs) and Application-Specific Integrated Circuit (ASIC) drivers for direct integration. The DM-ASIC system is designed to eliminate almost all cables, enabling a very compact optical system with low mass and low power consumption. We report on the optical tests used to evaluate the performance of the DM and ASIC units. We also compare the results to the requirements for space-based high-contrast imaging of exoplanets.

Development of an active boring bar for increased chatter immunity

DOE Office of Scientific and Technical Information (OSTI.GOV)

Redmond, J.; Barney, P.; Smith, D.

The development and initial evaluation of a prototype boring bar featuring active vibration control for increased chatter immunity is described. The significance of active damping both normal and tangential to the workpiece surface is evaluated, indicating the need for two axis control to ensure adequate performance over expected variations in tool mounting procedures. The prototype tool features a commercially available boring bar modified to accommodate four PZT stack actuators for two axis bending control. Measured closed-loop dynamics are combined with a computer model of the boring process to simulate increased metal removal rate and improved workpiece surface finish through activemore » control.« less

An overview of active flow control actuators and applications (presentation video)

NASA Astrophysics Data System (ADS)

Brzozowski, Daniel; Whalen, Edward A.

2014-04-01

Active Flow Control (AFC) is an emerging technology which promises performance enhancements to both military and civilian aircraft. A technique which uses energy input at discrete locations to manipulate the flow over an aerodynamic surface, AFC may be used to reduce drag, prevent flow separation, and enable otherwise-infeasible aerodynamic designs. Additional applications include shear layer and turbulence control for aero-optics applications and mixing enhancement for thermal applications. Many AFC applications call for a high frequency fluidic perturbation provided by an electrically-powered actuator. In these instances, piezoelectric (PZT) materials have served as the workhorse for flow control actuators, such as the widely-studied synthetic jet. Because the PZT materials form the critical component of the actuator, the maximum performance of the synthetic jet (velocity and momentum output) is limited by the physical limitations of the PZT material. The purpose of this presentation is to provide a high level overview of AFC actuators and applications in an attempt to engage the smart materials community and encourage advanced material development in support of these crucial applications.

Optimization of PbTiO3 Seed Layers for PZT MEMS Actuators

DTIC Science & Technology

2008-12-01

14. ABSTRACT The material properties of sol-gel lead zirconate titanate ( PZT ) are inherently linked with its crystallinity and texture . The use...will lead to a greater degree of texturing within the PZT thin film. Figure 6. X-ray diffraction data for PT seed solution. (001) oriented...previous studies PZT 45/55 has shown a higher piezoelectric coefficient compared to PZT 52/48 due to the random crystalline texture of the existing

Using the ferroelectric/ferroelastic effect at cryogenic temperatures for set-and-hold actuation

NASA Astrophysics Data System (ADS)

Steeves, J. B.; Golinveaux, F. S.; Lynch, C. S.

2018-06-01

The ferroelectric and ferroelastic properties of lead-zirconate-titanate (PZT) based stack actuators have been characterized at temperatures down to 25 K and under various levels of constant compressive stress. Experiments indicate that the coercive field and magnitude of strain at the coercive field display an inverse relationship with temperature. A factor of 5.5 increase in coercive field, and a factor of 4.3 increase in strain is observed at 25 K in comparison to the room-temperature conditions. This information was used to induce non-180° domain wall motion in the material through the application of electric fields at or near the coercive field. The change in remanent strain accompanying these effects was shown to increase in magnitude as temperature decreased, reaching values of 2000 ppm at 25 K. This behavior was also shown to be temporally stable even under compressive loads. Additionally, it was demonstrated that the material can be returned to its original strain state through a repolarizing electric field. This switchable behavior could be exploited for future set-and-hold type actuators operating at cryogenic temperatures.

Optimizing a spectral element for modeling PZT-induced Lamb wave propagation in thin plates

NASA Astrophysics Data System (ADS)

Ha, Sungwon; Chang, Fu-Kuo

2010-01-01

Use of surface-mounted piezoelectric actuators to generate acoustic ultrasound has been demonstrated to be a key component of built-in nondestructive detection evaluation (NDE) techniques, which can automatically inspect and interrogate damage in hard-to-access areas in real time without disassembly of the structural parts. However, piezoelectric actuators create complex waves, which propagate through the structure. Having the capability to model piezoelectric actuator-induced wave propagation and understanding its physics are essential to developing advanced algorithms for the built-in NDE techniques. Therefore, the objective of this investigation was to develop an efficient hybrid spectral element for modeling piezoelectric actuator-induced high-frequency wave propagation in thin plates. With the hybrid element we take advantage of both a high-order spectral element in the in-plane direction and a linear finite element in the thickness direction in order to efficiently analyze Lamb wave propagation in thin plates. The hybrid spectral element out-performs other elements in terms of leading to significantly faster computation and smaller memory requirements. Use of the hybrid spectral element is proven to be an efficient technique for modeling PZT-induced (PZT: lead zirconate titanate) wave propagation in thin plates. The element enables fundamental understanding of PZT-induced wave propagation.

Compositional Effects on Electromechanical Degradation of RAINBOW Actuators

NASA Technical Reports Server (NTRS)

Dausch, David E.; Wise, Stephanie A.

1998-01-01

The effect of ceramic composition on the electromechanical displacement degradation of RAINBOW (Reduced and Internally Biased Oxide Wafer) actuators was investigated. RAINBOWs were fabricated from commercially available PZT-5H and PZT-5A piezoelectric disks as well as from tape cast PLZT piezoelectric 7/65/35 and electrostrictive 9/65/35 compositions. Displacement properties were measured at low electric fields (10 to 13 kV/cm) under loads of 0 to 500 g, and displacement degradation as a function of time was observed over 107 cycles. The PZT-5A and PLZT 9/65/35 compositions exhibited minimal decrease in displacement when load was applied. Furthermore, these compositions retained approximately 65 percent of their initial displacement after 10(exp 7) cycles under a load of 300 g. PZT-5H and PLZT 7/65/35 degraded completely under these conditions.

TECHNICAL NOTE: The development of a PZT-based microdrive for neural signal recording

NASA Astrophysics Data System (ADS)

Park, Sangkyu; Yoon, Euisung; Lee, Sukchan; Shin, Hee-sup; Park, Hyunjun; Kim, Byungkyu; Kim, Daesoo; Park, Jongoh; Park, Sukho

2008-04-01

A hand-controlled microdrive has been used to obtain neural signals from rodents such as rats and mice. However, it places severe physical stress on the rodents during its manipulation, and this stress leads to alertness in the mice and low efficiency in obtaining neural signals from the mice. To overcome this issue, we developed a novel microdrive, which allows one to adjust the electrodes by a piezoelectric device (PZT) with high precision. Its mass is light enough to install on the mouse's head. The proposed microdrive has three H-type PZT actuators and their guiding structure. The operation principle of the microdrive is based on the well known inchworm mechanism. When the three PZT actuators are synchronized, linear motion of the electrode is produced along the guiding structure. The electrodes used for the recording of the neural signals from neuron cells were fixed at one of the PZT actuators. Our proposed microdrive has an accuracy of about 400 nm and a long stroke of about 5 mm. In response to formalin-induced pain, single unit activities are robustly measured at the thalamus with electrodes whose vertical depth is adjusted by the microdrive under urethane anesthesia. In addition, the microdrive was efficient in detecting neural signals from mice that were moving freely. Thus, the present study suggests that the PZT-based microdrive could be an alternative for the efficient detection of neural signals from mice during behavioral states without any stress to the mice.

A new traveling wave ultrasonic motor using thick ring stator with nested PZT excitation.

PubMed

Chen, Weishan; Shi, Shengjun; Liu, Yingxiang; Li, Pei

2010-05-01

To avoid the disadvantages of conventional traveling wave ultrasonic motors--lower efficiency PZT working mode of d(31), fragility of the PZT element under strong excitation, fatigue of the adhesive layer under harsh environmental conditions, and low volume of the PZT material in the stator--a new type of traveling wave ultrasonic motor is presented in this paper. Here we implement the stator by nesting 64 PZT stacks in 64 slots specifically cut in a thick metal ring and 64 block springs nested within another 64 slots to produce preloading on the PZT stacks. In this new design, the d33 mode of the PZT is used to excite the flexural vibrations of the stator, and fragility of the PZT ceramics and fatigue of the adhesive layer are no longer an issue. The working principle, FEM simulation, fabrication, and performance measurements of a prototype motor were demonstrated to validate the proposed ideas. Typical output of the prototype motor is no-load speed of 15 rpm and maximum torque of 7.96 N x m. Further improvement will potentially enhance its features by increasing the accuracy in fabrication and adopting appropriate frictional material into the interface between the stator and the rotor.

Multiscale Modeling of Advanced Materials for Damage Prediction and Structural Health Monitoring

DTIC Science & Technology

2015-05-01

Viscoplasticity Model ................................................. 71 4.1. PZT (APC 850) Orthotropic Properties...surface-mounted lead zirconate titanate ( PZT ) transducer using a coupled FEM-normal mode expansion method. Other researchers have also utilized the...orthotropic material properties of the PZT piezoelectric actuators and sensors are presented in Table 4.1. A 5 cycle cosine tone burst signal, seen in

Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films.

PubMed

Benoit, Robert R; Jordan, Delaney M; Smith, Gabriel L; Polcawich, Ronald G; Bedair, Sarah S; Potrepka, Daniel M

2018-05-01

Direct-write laser grayscale lithography has been used to facilitate a single-step patterning technique for multilayer lead zirconate titanate (PZT) thin films. A 2.55- -thick photoresist was patterned with a direct-write laser. The intensity of the laser was varied to create both tiered and sloped structures that are subsequently transferred into multilayer PZT(52/48) stacks using a single Ar ion-mill etch. Traditional processing requires a separate photolithography step and an ion mill etch for each layer of the substrate, which can be costly and time consuming. The novel process allows access to buried electrode layers in the multilayer stack in a single photolithography step. The grayscale process was demonstrated on three 150-mm diameter Si substrates configured with a 0.5- -thick SiO 2 elastic layer, a base electrode of Pt/TiO 2 , and a stack of four PZT(52/48) thin films of either 0.25- thickness per layer or 0.50- thickness per layer, and using either Pt or IrO 2 electrodes above and below each layer. Stacked capacitor structures were patterned and results will be reported on the ferroelectric and electromechanical properties using various wiring configurations and compared to comparable single layer PZT configurations.

Fatigue response of a PZT multilayer actuator under high-field electric cycling with mechanical preload

NASA Astrophysics Data System (ADS)

Wang, Hong; Wereszczak, Andrew A.; Lin, Hua-Tay

2009-01-01

An electric fatigue test system was developed for evaluating the reliability of piezoelectric actuators with a mechanical loading capability. Fatigue responses of a lead zirconate titanate (PZT) multilayer actuator with a platethrough electrode configuration were studied under an electric field (1.7 times that of the coercive field of PZT material) and a concurrent mechanical preload (30.0 MPa). A total of 109 cycles was carried out. Variations in charge density and mechanical strain under the high electric field and constant mechanical loads were observed during the fatigue test. The dc and the first harmonic (at 10 Hz) dielectric and piezoelectric coefficients were subsequently characterized using fast Fourier transformation. Both the dielectric and the piezoelectric coefficients exhibited a monotonic decrease prior to 2.86×108 cycles under certain preloading conditions, and then fluctuated. Both the dielectric loss tangent and the piezoelectric loss tangent also fluctuated after a decrease. The results are interpreted and discussed with respect to domain wall activities, microdefects, and other anomalies.

Development of lightweight THUNDER with fiber composite layers

NASA Astrophysics Data System (ADS)

Yoon, Kwang J.; Shin, Sukjoon; Kim, Jusik; Park, Hoon C.; Kwak, Moon K.

2000-06-01

This paper is concerned with design, manufacturing and performance test of lightweight THUNDER using a top fiber composite layer with near-zero CTE, a PZT ceramic wafer and a bottom glass/epoxy layer with high CTE. The main point of this design is to replace the heavy metal layers of THUNDER by the lightweight fiber reinforced plastic layers without losing capabilities to generate high force and displacement. It is possible to save weight up to about 30 percent if we replace the metallic backing materials by the light fiber composite layer. We can also have design flexibility by selecting the fiber direction and the size of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use epoxy resin prepreg system. Glass/epoxy prepregs, a ceramic wafer with electrode surfaces, and a graphite/epoxy prepreg were simply stacked and cured at an elevated temperature by following autoclave bagging process. It was found that the manufactured composite laminate device had a sufficient curvature after detaching form a flat mold. From experimental actuation tests, it was observed that the developed actuator could generate larger actuation displacement than THUNDER.

Design and Fabrication of 1D and 2D Micro Scanners Actuated by Double Layered Lead Zirconate Titanate (PZT) Bimorph Beams

NASA Astrophysics Data System (ADS)

Tsaur, Jiunnjye; Zhang, Lulu; Maeda, Ryutaro; Matsumoto, Sohei; Khumpuang, Sommawan

2002-06-01

Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield large bending force, the sol-gel derived double layered lead zirconate titanate (PZT) structures are developed to be the actuator components. In our developed fabrication process, the use of thermal treatment and the addition of one platinium/titanium film played an important role to yield the well-crystallized perovskite phase and decrease the residual strss of total cantilever structures successfully. In the case of 1D scanner beams with the size of 750× 230 μm2, the optical scanning angle was 41.2 deg with respect to actuation with AC 5 V at 2706 Hz. Under the applied bias of 10 V, the bimorph beam bended upward and the deflection angle of 34.3 deg was measured. A 2D scanning micromirror supported by four suspended double layered PZT actuators was designed to rotate around two orthogonal axes by the operation at different resonant frequencies. While resonating with AC 7.5 V at 3750 Hz and 5350 Hz, the maximum scanning area of 24\\circ× 26\\circ was obtained.

A Piezoelectric PZT Ceramic Mulitlayer Stack for Energy Harvesting Under Dynamic Forces

NASA Technical Reports Server (NTRS)

Xu, Tian-Bing; Siochi, Emilie J.; Kang, Jin Ho; Zuo, Lei; Zhou, Wanlu; Tang, Xiudong; Jiang, Xiaoning

2011-01-01

Piezoelectric energy harvesting transducers (PEHTs) are commonly used in motion/vibration energy scavenging devices. To date, most researchers have focused on energy harvesting at narrow bandwidths around the mechanical resonance frequency, and most piezoelectric harvesting devices reported in the literature have very low effective piezoelectric coefficient (d(sub eff)) (< 10(exp 4) pC/N). For instance, more than 80% of PEHT related papers are on transverse "31" mode cantilever beam type PEHTs (CBPEHTs) having piezoelectric coefficients of about 100 pC/N. The level of harvested electrical power for CBPEHTs is on the order of microW even at resonance mode. In order to harvest more electrical energy across broader bandwidth, high effective piezoelectric coefficient structures are needed. In this study, we investigate a "33" longitudinal mode, piezoelectric PZT ceramic multilayer stack (PZT-Stack) with high effective piezoelectric coefficient for high-performance PEHTs. The PZT-Stack is composed of 300 layers of 0.1 mm thick PZT plates, with overall dimensions of 32.4 mm X 7.0 mm X 7.0 mm. Experiments were carried out with dynamic forces in a broad bandwidth ranging from 0.5 Hz to 25 kHz. The measured results show that the effective piezoelectric coefficient of the PZT-stack is about 1 X 10(exp 5) pC/N at off-resonance frequencies and 1.39 X 10(exp 6) pC/N at resonance, which is order of magnitude larger than that of traditional PEHTs. The effective piezoelectric coefficients (d(sub eff)) do not change significantly with applied dynamic forces having root mean square (RMS) values ranging from 1 N to 40 N. In resonance mode, 231 mW of electrical power was harvested at 2479 Hz with a dynamic force of 11.6 N(sub rms), and 7.6 mW of electrical power was generated at a frequency of 2114 Hz with 1 N(sub rms) dynamic force. In off-resonance mode, an electrical power of 18.7 mW was obtained at 680 Hz with a 40 N(sub rms) dynamic force. A theoretical model of energy harvesting for the PZT-Stack is established. The modeled results matched well with experimental measurements. This study demonstrated that high effective piezoelectric coefficient structures enable PEHTs to harvest more electrical energy from mechanical vibrations or motions, suggesting an effective design for high-performance low-footprint PEHTs with potential applications in military, aerospace, and portable electronics. In addition, this study provides a route for using piezoelectric multilayer stacks for active or semi-active adaptive control to damp, harvest or transform unwanted dynamic vibrations into useful electrical energy.

A New Paradigm for NDE (Non Destructive Evaluation)

DTIC Science & Technology

2013-12-06

determining specific physical properties of the armor which are correlated with armor structural health. A pair of Lead Zirconate Titanate ( PZT ...this is commonly called the “pitch and catch” method. The armor plate vibrates when it is excited by a mechanical vibration from the PZT actuator...transducer, and this vibration is transmitted through the plate and induces an electrical signal in the PZT receiver transducer by virtue of the

Manufacturing of prestressed piezoelectric unimorphs using a postfired biasing layer.

PubMed

Juuti, Jari A; Jantunen, Heli; Moilanen, Veli-Pekka; Leppävuori, Seppo

2006-05-01

A novel manufacturing method for prestressed piezoelectric unimorphs is introduced and the actuator properties are examined. Prestressed PZT 5A and PZT 5H unimorphs with piezo material thickness of 250 microm and 375 microm were manufactured by using sintering and thermal shrinkage of the prestressing material. The process was carried out by screen printing a layer of AgPd paste on one side of the sintered bulk ceramic. As an alternative method, dielectric low temperature co-fired ceramic (LTCC) tape was used as the prestressing material. Different configurations were tested to obtain high displacements and to make a comparison between materials. After firing, the samples were poled, and the displacement versus load characteristics of the resulting actuators were investigated. A maximum displacement of 118 microm was obtained from a 250 microm thick, prestressed PZT 5H actuator with a diameter of 25 mm, in which LTCC tape was used as the prestressing layer. Similarly, the PZT 5H material provided a maximum displacement of 63 microm with a screen-printed AgPd prestressing layer. The manufacturing method described offers a novel approach for the production of a wide range of integrated active structures on, for instance, an LTCC circuit board. This is especially important because piezoelectric bulk materials with high piezoelectric coefficients can be used to produce high displacements.

Multifield analysis of a piezoelectric valveless micropump: effects of actuation frequency and electric potential

NASA Astrophysics Data System (ADS)

Sayar, Ersin; Farouk, Bakhtier

2012-07-01

Coupled multifield analysis of a piezoelectrically actuated valveless micropump device is carried out for liquid (water) transport applications. The valveless micropump consists of two diffuser/nozzle elements; the pump chamber, a thin structural layer (silicon), and a piezoelectric layer, PZT-5A as the actuator. We consider two-way coupling of forces between solid and liquid domains in the systems where actuator deflection causes fluid flow and vice versa. Flow contraction and expansion (through the nozzle and the diffuser respectively) generate net fluid flow. Both structural and flow field analysis of the microfluidic device are considered. The effect of the driving power (voltage) and actuation frequency on silicon-PZT-5A bi-layer membrane deflection and flow rate is investigated. For the compressible flow formulation, an isothermal equation of state for the working fluid is employed. The governing equations for the flow fields and the silicon-PZT-5A bi-layer membrane motions are solved numerically. At frequencies below 5000 Hz, the predicted flow rate increases with actuation frequency. The fluid-solid system shows a resonance at 5000 Hz due to the combined effect of mechanical and fluidic capacitances, inductances, and damping. Time-averaged flow rate starts to drop with increase of actuation frequency above (5000 Hz). The velocity profile in the pump chamber becomes relatively flat or plug-like, if the frequency of pulsations is sufficiently large (high Womersley number). The pressure, velocity, and flow rate prediction models developed in the present study can be utilized to optimize the design of MEMS based micropumps.

Feasibility of using piezoelectric actuators to control launch vehicle acoustics and structural vibrations

NASA Astrophysics Data System (ADS)

Niezrecki, Christopher; Cudney, Harley H.

2000-06-01

Future launch vehicle payload fairings will be manufactured form advanced lightweight composite materials. The loss of distributed mass causes a significant increase in the internal acoustic environment, causing a severe threat to the payload. Using piezoelectric actuators to control the fairing vibration and the internal acoustic environment has been proposed. To help determine the acoustic control authority of piezoelectric actuators mounted on a rocket fairing, the internal acoustic response created by the actuators needs to be determined. In this work, the internal acoustic response of a closed simply-supported (SS) cylinder actuated by piezoelectric (PZT) actuators is determined using a n impedance model for the actuator and boundary element analysis. The experimentally validated model is used to extrapolate results for a SS cylinder that emulates a Minotaur payload fairing. The internal cylinder acoustic levels are investigated for PZT actuation between 35 and 400 Hz. Significant reductions in the structural response due to increased damping do not equate to similar reductions in the acoustic SPLs for the cylinder. The sound levels at the acoustic resonant frequencies are essentially unaffected by the significant increase in structural damping while the acoustic level sat the structural resonant frequencies are mildly reduced. The interior acoustic response of the cylinder is dominated by the acoustic modes and therefore significant reductions in the overall interior acoustic levels will not be achieved if only the structural resonances are controlled. As the actuation frequency is reduced, the number of actuators required to generate acoustic levels commensurate to that found in the fairing increases to impractical values. Below approximately 100 Hz, the current demands reach levels that are extremely difficult to achieve with a practical system. The results of this work imply that PZT actuators do not have the authority to control the payload fairing internal acoustics below approximately 100 Hz.

Modeling of mechanical properties of stack actuators based on electroactive polymers

NASA Astrophysics Data System (ADS)

Tepel, Dominik; Graf, Christian; Maas, Jürgen

2013-04-01

Dielectric elastomers are thin polymer films belonging to the class of electroactive polymers, which are coated with compliant and conductive electrodes on each side. Under the influence of an electrical field, dielectric elastomers perform a large amount of deformation. Depending on the mechanical setup, stack and roll actuators can be realized. In this contribution the mechanical properties of stack actuators are modeled by a holistic electromechanical approach of a single actuator film, by which the model of a stack actuator without constraints can be derived. Due to the mechanical connection between the stack actuator and the application, bulges occur at the free surfaces of the EAP material, which are calculated, experimentally validated and considered in the model of the stack actuator. Finally, the analytic actuator film model as well as the stack actuator model are validated by comparison to numerical FEM-models in ANSYS.

Large Stroke High Fidelity PZN-PT Single-Crystal "Stake" Actuator.

PubMed

Huang, Yu; Xia, Yuexue; Lin, Dian Hua; Yao, Kui; Lim, Leong Chew

2017-10-01

A new piezoelectric actuator design, called "Stake" actuator, is proposed and demonstrated in this paper. As an example, the stake actuator is made of four d 32 -mode PZN-5.5%PT single crystals (SCs), each of 25 mm ( L ) ×8 mm ( W ) ×0.4 mm (T) in dimensions, bonded with the aid of polycarbonate edge guide-cum-stiffeners into a square-pipe configuration for improved bending and twisting strengths and capped with top and bottom pedestals made of 1.5-mm-thick anodized aluminum. The resultant stake actuator measured 9 mm ×9 mm ×28 mm. The hollow structure is a key design feature, which optimizes SC usage efficiency and lowers the overall cost of the actuator. The displacement-voltage responses, blocking forces, resonance characteristics of the fabricated stake actuator, as well as the load and temperature effects, are measured and discussed. Since d 32 is negative for [011]-poled SC, the "Stake" actuator contracts in the axial direction when a positive-polarity field is applied to the crystals. Biased drive is thus recommended when extensional displacement is desired. The SC stake actuator has negligible (<1%) hysteresis and a large linear strain range of >0.13% when driven up to +300 V (i.e., 0.75 kV/mm), which is close to the rhombohedral-to-orthorhombic transformation field ( E RO ) of 0.85 kV/mm of the SC used. The stake actuator displays a stroke of [Formula: see text] (at +300 V) despite its small overall dimensions, and has a blocking force of 114 N. The SC d 32 stake actuator fabricated displays more than 30% larger axial strain than the state-of-the-art PZT stack actuators of comparable length as well as moderate blocking forces. Said actuators are thus ideal for applications when large displacements with simple open-loop control are preferred.

A bi-axial active boring tool for chatter mitigation

DOE Office of Scientific and Technical Information (OSTI.GOV)

Redmond, J.M.; Barney, P.S.

This paper summarizes results of metal cutting tests using an actively damped boring bar to suppress regenerative chatter. PZT stack actuators were integrated into a commercially available two-inch diameter boring bar to suppress bending vibrations. Since the modified tool requires no specialized mounting hardware, it can be readily mounted on a variety of machines. A cutting test using the prototype bar to remove metal from a hardened steel workpiece verifies that the authors actively damped tool yields significant vibration reduction and improved surface finish as compared to the open-loop case. In addition, the overall performance of the prototype bar ismore » compared to that of an unmodified bar of pristine geometry, revealing that a significant enlargement of the stable machining envelope is obtained through application of feedback control.« less

Resonant-type Smooth Impact Drive Mechanism (SIDM) actuator using a bolt-clamped Langevin transducer.

PubMed

Nishimura, Takuma; Hosaka, Hiroshi; Morita, Takeshi

2012-01-01

The Smooth Impact Drive Mechanism (SIDM) is a linear piezoelectric actuator that has seen practically applied to camera lens modules. Although previous SIDM actuators are easily miniaturized and enable accurate positioning, these actuators cannot actuate at high speed and cannot provide powerful driving because they are driven at an off-resonant frequency using a soft-type PZT. In the present study, we propose a resonant-type SIDM using a bolt-clamped Langevin transducer (BLT) with a hard-type PZT. The resonant-type SIDM overcomes the above-mentioned problems and high-power operation becomes possible with a very simple structure. As a result, we confirmed the operation of resonant-type SIDM by designing a bolt-clamped Langevin transducer. The properties of no-load maximum speed was 0.28m/s at driving voltages of 80V(p-p) for 44.9kHz and 48V(p-p) for 22.45kHz with a pre-load of 3.1N. Copyright © 2011 Elsevier B.V. All rights reserved.

Giant actuation strain nearly 0.6% in a periodically orthogonal poled lead titanate zirconate ceramic via reversible domain switching

NASA Astrophysics Data System (ADS)

Li, Faxin; Wang, Qiangzhong; Miao, Hongchen

2017-08-01

The widely used ferroelectric ceramics based actuators always suffer from small output strains (typically ˜0.1%-0.15%). Non-180° domain switching can generate a large strain in ferroelectrics but it is usually irreversible. In this work, we tailored the domain structures in a soft lead titanate zirconate (PZT) ceramic by periodical orthogonal poling. The non-180° switching in this domain-engineered PZT ceramics turns to be reversible, resulting in a local giant actuation strain of nearly 0.6% under a field of 2 kV/mm at 0.1 Hz. The large interfacial stresses between regions with different poling directions during electric loading/unloading were thought to be responsible for the reversible non-180° domain switching. The switching strain drops quickly with the increasing frequency, and stabilized at about 0.2% at or above 1.0 Hz. The large actuation strain remains quite stable after 104 cycles of loading, which is very promising for low-frequency, large-strain actuators.

Development of PZT Actuated Valveless Micropump.

PubMed

Munas, Fathima Rehana; Melroy, Gehan; Abeynayake, Chamitha Bhagya; Chathuranga, Hiniduma Liyanage; Amarasinghe, Ranjith; Kumarage, Pubudu; Dau, Van Thanh; Dao, Dzung Viet

2018-04-24

A piezoelectrically actuated valveless micropump has been designed and developed. The principle components of this system are piezoelectrically actuated (PZT) metal diaphragms and a complete fluid flow system. The design of this pump mainly focuses on a cross junction, which is generated by a nozzle jet attached to a pump chamber and the intersection of two inlet channels and an outlet channel respectively. During each PZT diaphragm vibration cycle, the junction connecting the inlet and outlet channels with the nozzle jet permits consistencies in fluidic momentum and resistances in order to facilitate complete fluidic path throughout the system, in the absence of any physical valves. The entire micropump structure is fabricated as a plate-by-plate element of polymethyl methacrylate (PMMA) sheets and sandwiched to get required fluidic network as well as the overall device. In order to identify the flow characteristics, and to validate the test results with numerical simulation data, FEM analysis using ANSYS was carried out and an eigenfrequency analysis was performed to the PZT diaphragm using COMSOL Multiphysics. In addition, the control system of the pump was designed and developed to change the applied frequency to the piezoelectric diaphragms. The experimental data revealed that the maximum flow rate is 31.15 mL/min at a frequency of 100 Hz. Our proposed design is not only for a specific application but also useful in a wide range of biomedical applications.

Numerical study on the mechanism of active interfacial debonding detection for rectangular CFSTs based on wavelet packet analysis with piezoceramics

NASA Astrophysics Data System (ADS)

Xu, Bin; Chen, Hongbing; Xia, Song

2017-03-01

In recent years, Piezoelectric Lead Zirconate Titanate (PZT) based active interfacial debonding defect detection approach for concrete-filled steel tubular (CFST) columns has been proposed and validated experimentally. In order to investigate the mechanism of the PZT based interfacial debonding detection approach, a multi-physics coupling finite element model (FEM) composed of surface-mounted PZT actuator, embedded PZT sensor and a rectangular CFST column is constructed to numerically simulate the stress wave propagation induced by the surface-mounted PZT actuator under different excitation signals with different frequency and amplitude. The measurements of the embedded PZT sensor in concrete core of the CFST columns with different interfacial debonding defect lengths and depths are determined numerically with transient dynamic analysis. The linearity between the PZT response and the input amplitude, the effect of different frequency and measurement distance are discussed and the stress wave fields of CFST members without and with interface debonding defects are compared. Then, the response of the embedded PZT in concrete core is analyzed with wavelet packet analysis. The root mean square deviation (RMSD) of wavelet packet energy spectrum of the PZT measurement is employed as an evaluation index for the interfacial debonding detection. The results showed that the defined index under continuous sinusoidal and sweep frequency signals changes with the interfacial defects length and depth and is capable of effectively identifying the interfacial debonding defect between the concrete core and the steel tubular. Moreover, the index under sweep frequency signal is more sensitive to the interfacial debonding. The simulation results indicate that the interfacial debonding defect leads to the changes in the propagation path, travel time and the magnitude of stress waves. The simulation results meet the findings from the previous experimental study by the authors and help understand the mechanism of interfacial debonding defect detection for CFSTs using PZT technology.

PZT Thin-Film Micro Probe Device with Dual Top Electrodes

NASA Astrophysics Data System (ADS)

Luo, Chuan

Lead zirconate titanate (PZT) thin-film actuators have been studied intensively for years because of their potential applications in many fields. In this dissertation, a PZT thin-film micro probe device is designed, fabricated, studied, and proven to be acceptable as an intracochlear acoustic actuator. The micro probe device takes the form of a cantilever with a PZT thin-film diaphragm at the tip of the probe. The tip portion of the probe will be implanted in cochlea later in animal tests to prove its feasibility in hearing rehabilitation. The contribution of the dissertation is three-fold. First, a dual top electrodes design, consisting of a center electrode and an outer electrode, is developed to improve actuation displacement of the PZT thin-film diaphragm. The improvement by the dual top electrodes design is studied via a finite element model. When the dimensions of the dual electrodes are optimized, the displacement of the PZT thin-film diaphragm increases about 30%. A PZT thin-film diaphragm with dual top electrodes is fabricated to prove the concept, and experimental results confirm the predictions from the finite element analyses. Moreover, the dual electrode design can accommodate presence of significant residual stresses in the PZT thin-film diaphragm by changing the phase difference between the two electrodes. Second, a PZT thin-film micro probe device is fabricated and tested. The fabrication process consists of PZT thin-film deposition and deep reactive ion etching (DRIE). The uniqueness of the fabrication process is an automatic dicing mechanism that allows a large number of probes to be released easily from the wafer. Moreover, the fabrication is very efficient, because the DRIE process will form the PZT thin-film diaphragm and the special dicing mechanism simultaneously. After the probes are fabricated, they are tested with various possible implantation depths (i.e., boundary conditions). Experimental results show that future implantation depths should be less than 3 mm in order to guarantee the first resonant frequency above 60 kHz. Finally, a package for the PZT thin-film micro probe device is developed to ensure its proper function in an aqueous environment, such as inside of cochlea. The package is an insulation layer of parylene coating on the probe. A finite element analysis indicates that a coating thickness of less than 1 mum will reduce the PZT diaphragm displacement by less than 10%. A special fixture is designed to hold a large number of probes for parylene deposition of a thickness of 250 nm. A packaged probe is then submerged in deionized water and functions properly for at least 55 hours. Displacement and impedance of the probe are measured via a laser Doppler vibrometer and an impedance analyzer, respectively. Experimental results show that displacement of the PZT diaphragm increases about 30% in two hours, after the probe is submerged in the deionized water. The impedance measurement shows consistent trends. A hypothesis to explain this unusual phenomenon is diffusion of water molecules into the PZT thin film. High-resolution SEM images of the probe indicate presence of numerous nano-pores in the surface of the PZT thin film, indirectly confirming the hypothesis. Keywords: PZT, Thin-Film, Dual Electrodes, Parylene Coating, Aqueous Environment, Cochlear Implant

Lead magnesium niobate actuator for micropositioning

DOEpatents

Swift, Charles D.; Bergum, John W.

1994-01-01

An improved lead magnesium niobate actuator is disclosed comprising a cylindrical lead magnesium niobate crystal stack mounted in a cylindrical casing wherein a bias means, such as one or more belleville washers, is located between one end of the crystal stack and a partially closed end of the casing; and adjustment means are provided which bear against the opposite end of the crystal stack, whereby an adjustable compressive force is constantly applied against the crystal stack, whether the crystal stack is actuated in an extended position, or is in an unactuated contracted position. In a preferred embodiment, cooling ports are provided for the circulation of coolant in the actuator to cool the crystal stack, and provision is made for removal and replacement of the crystal stack without disconnecting the actuator from the external device being actuated.

Self-biased magnetoelectric charge coupling in transducer of SmFe2, Pb(Zr,Ti)O3 stack, and stepped horn substrate with multi-frequency effect

NASA Astrophysics Data System (ADS)

Tang, Chengpei; Lu, Caijiang; Gao, Hongli; Fu, Guoqiang

2017-10-01

This paper presents a broadband, self-biased magnetoelectric (ME) charge coupling in a transducer comprising of a negative magnetostrictive SmFe2 plate, a piezoelectric Pb(Zr,Ti)O3 (PZT) stack, and a stepped horn substrate. By using the SmFe2 plate with a large anisotropic field, an outstanding self-biased piezomagnetic effect is realized. The horn serves as a waveguide with multiple resonances and converges vibrating energy excited by the SmFe2 plate from the wide side to the narrow side, which results in a higher vibrating magnification at the position of the PZT-stack. Then, a strong mechanical-electric coupling is realized by the use of the PZT-stack with high capacitance. Consequently, several large peaks of ME charge response with magnitudes of 1.02-18.99 nC/Oe in the 0.1-50 kHz range are observed at zero-biased magnetic field. This demonstrates that the proposed broadband self-biased structure may be useful for multifunctional devices such as low frequency AC magnetic field sensors or multi-frequency energy harvesters.

Effect of External Vibration on PZT Impedance Signature.

PubMed

Yang, Yaowen; Miao, Aiwei

2008-11-01

Piezoelectric ceramic Lead Zirconate Titanate (PZT) transducers, working on the principle of electromechanical impedance (EMI), are increasingly applied for structural health monitoring (SHM) in aerospace, civil and mechanical engineering. The PZT transducers are usually surface bonded to or embedded in a structure and subjected to actuation so as to interrogate the structure at the desired frequency range. The interrogation results in the electromechanical admittance (inverse of EMI) signatures which can be used to estimate the structural health or integrity according to the changes of the signatures. In the existing EMI method, the monitored structure is only excited by the PZT transducers for the interrogating of EMI signature, while the vibration of the structure caused by the external excitations other than the PZT actuation is not considered. However, many structures work under vibrations in practice. To monitor such structures, issues related to the effects of vibration on the EMI signature need to be addressed because these effects may lead to misinterpretation of the structural health. This paper develops an EMI model for beam structures, which takes into account the effect of beam vibration caused by the external excitations. An experimental study is carried out to verify the theoretical model. A lab size specimen with different external excitations is tested and the effect of vibration on EMI signature is discussed.

Genetic Adaptive Control for PZT Actuators

NASA Technical Reports Server (NTRS)

Kim, Jeongwook; Stover, Shelley K.; Madisetti, Vijay K.

1995-01-01

A piezoelectric transducer (PZT) is capable of providing linear motion if controlled correctly and could provide a replacement for traditional heavy and large servo systems using motors. This paper focuses on a genetic model reference adaptive control technique (GMRAC) for a PZT which is moving a mirror where the goal is to keep the mirror velocity constant. Genetic Algorithms (GAs) are an integral part of the GMRAC technique acting as the search engine for an optimal PID controller. Two methods are suggested to control the actuator in this research. The first one is to change the PID parameters and the other is to add an additional reference input in the system. The simulation results of these two methods are compared. Simulated Annealing (SA) is also used to solve the problem. Simulation results of GAs and SA are compared after simulation. GAs show the best result according to the simulation results. The entire model is designed using the Mathworks' Simulink tool.

Lead magnesium niobate actuator for micropositioning

DOEpatents

Swift, C.D.; Bergum, J.W.

1994-10-25

An improved lead magnesium niobate actuator is disclosed comprising a cylindrical lead magnesium niobate crystal stack mounted in a cylindrical casing wherein a bias means, such as one or more belleville washers, is located between one end of the crystal stack and a partially closed end of the casing; and adjustment means are provided which bear against the opposite end of the crystal stack, whereby an adjustable compressive force is constantly applied against the crystal stack, whether the crystal stack is actuated in an extended position, or is in an unactuated contracted position. In a preferred embodiment, cooling ports are provided for the circulation of coolant in the actuator to cool the crystal stack, and provision is made for removal and replacement of the crystal stack without disconnecting the actuator from the external device being actuated. 3 figs.

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

NASA Astrophysics Data System (ADS)

Fanget, S.; Casset, F.; Dejaeger, R.; Maire, F.; Desloges, B.; Deutzer, J.; Morisson, R.; Bohard, Y.; Laroche, B.; Escato, J.; Leclere, Q.

This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr0.52,Ti0.48)O3 (PZT) thin-film actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8 V).

Finite element analysis of multilayer DEAP stack-actuators

NASA Astrophysics Data System (ADS)

Kuhring, Stefan; Uhlenbusch, Dominik; Hoffstadt, Thorben; Maas, Jürgen

2015-04-01

Dielectric elastomers (DE) are thin polymer films belonging to the class of electroactive polymers (EAP). They are coated with compliant and conductive electrodes on each side, which make them performing a relative high amount of deformation with considerable force generation under the influence of an electric field. Because the realization of high electric fields with a limited voltage level requests single layer polymer films to be very thin, novel multilayer actuators are utilized to increase the absolute displacement and force. In case of a multilayer stack-actuator, many actuator films are mechanically stacked in series and electrically connected in parallel. Because there are different ways to design such a stack-actuator, this contribution considers an optimization of some design parameters using the finite element analysis (FEA), whereby the behavior and the actuation of a multilayer dielectric electroactive polymer (DEAP) stack-actuator can be improved. To describe the material behavior, first different material models are compared and necessary material parameters are identified by experiments. Furthermore, a FEA model of a DEAP film is presented, which is expanded to a multilayer DEAP stack-actuator model. Finally, the results of the FEA are discussed and conclusions for design rules of optimized stack-actuators are outlined.

Model-Based, Closed-Loop Control of PZT Creep for Cavity Ring-Down Spectroscopy

PubMed Central

McCartt, A D; Ognibene, T J; Bench, G; Turteltaub, K W

2014-01-01

Cavity ring-down spectrometers typically employ a PZT stack to modulate the cavity transmission spectrum. While PZTs ease instrument complexity and aid measurement sensitivity, PZT hysteresis hinders the implementation of cavity-length-stabilized, data-acquisition routines. Once the cavity length is stabilized, the cavity’s free spectral range imparts extreme linearity and precision to the measured spectrum’s wavelength axis. Methods such as frequency-stabilized cavity ring-down spectroscopy have successfully mitigated PZT hysteresis, but their complexity limits commercial applications. Described herein is a single-laser, model-based, closed-loop method for cavity length control. PMID:25395738

Model-Based, Closed-Loop Control of PZT Creep for Cavity Ring-Down Spectroscopy.

PubMed

McCartt, A D; Ognibene, T J; Bench, G; Turteltaub, K W

2014-09-01

Cavity ring-down spectrometers typically employ a PZT stack to modulate the cavity transmission spectrum. While PZTs ease instrument complexity and aid measurement sensitivity, PZT hysteresis hinders the implementation of cavity-length-stabilized, data-acquisition routines. Once the cavity length is stabilized, the cavity's free spectral range imparts extreme linearity and precision to the measured spectrum's wavelength axis. Methods such as frequency-stabilized cavity ring-down spectroscopy have successfully mitigated PZT hysteresis, but their complexity limits commercial applications. Described herein is a single-laser, model-based, closed-loop method for cavity length control.

Rate dependent direct inverse hysteresis compensation of piezoelectric micro-actuator used in dual-stage hard disk drive head positioning system.

PubMed

Rahman, Md Arifur; Al Mamun, Abdullah; Yao, Kui

2015-08-01

The head positioning servo system in hard disk drive is implemented nowadays using a dual-stage actuator—the primary stage consisting of a voice coil motor actuator providing long range motion and the secondary stage controlling the position of the read/write head with fine resolution. Piezoelectric micro-actuator made of lead zirconate titanate (PZT) has been a popular choice for the secondary stage. However, PZT micro-actuator exhibits hysteresis—an inherent nonlinear characteristic of piezoelectric material. The advantage expected from using the secondary micro-actuator is somewhat lost by the hysteresis of the micro-actuator that contributes to tracking error. Hysteresis nonlinearity adversely affects the performance and, if not compensated, may cause inaccuracy and oscillation in the response. Compensation of hysteresis is therefore an important aspect for designing head-positioning servo system. This paper presents a new rate dependent model of hysteresis along with rigorous analysis and identification of the model. Parameters of the model are found using particle swarm optimization. Direct inverse of the proposed rate-dependent generalized Prandtl-Ishlinskii model is used as the hysteresis compensator. Effectiveness of the overall solution is underscored through experimental results.

Fabrication of flexible piezoelectric PZT/fabric composite.

PubMed

Chen, Caifeng; Hong, Daiwei; Wang, Andong; Ni, Chaoying

2013-01-01

Flexible piezoelectric PZT/fabric composite material is pliable and tough in nature which is in a lack of traditional PZT patches. It has great application prospect in improving the sensitivity of sensor/actuator made by piezoelectric materials especially when they are used for curved surfaces or complicated conditions. In this paper, glass fiber cloth was adopted as carrier to grow PZT piezoelectric crystal particles by hydrothermal method, and the optimum conditions were studied. The results showed that the soft glass fiber cloth was an ideal kind of carrier. A large number of cubic-shaped PZT nanocrystallines grew firmly in the carrier with a dense and uniform distribution. The best hydrothermal condition was found to be pH 13, reaction time 24 h, and reaction temperature 200°C.

Fabrication of Flexible Piezoelectric PZT/Fabric Composite

PubMed Central

Chen, Caifeng; Hong, Daiwei; Wang, Andong; Ni, Chaoying

2013-01-01

Flexible piezoelectric PZT/fabric composite material is pliable and tough in nature which is in a lack of traditional PZT patches. It has great application prospect in improving the sensitivity of sensor/actuator made by piezoelectric materials especially when they are used for curved surfaces or complicated conditions. In this paper, glass fiber cloth was adopted as carrier to grow PZT piezoelectric crystal particles by hydrothermal method, and the optimum conditions were studied. The results showed that the soft glass fiber cloth was an ideal kind of carrier. A large number of cubic-shaped PZT nanocrystallines grew firmly in the carrier with a dense and uniform distribution. The best hydrothermal condition was found to be pH 13, reaction time 24 h, and reaction temperature 200°C. PMID:24348194

Biotemplated synthesis of PZT nanowires.

PubMed

Cung, Kellye; Han, Booyeon J; Nguyen, Thanh D; Mao, Sheng; Yeh, Yao-Wen; Xu, Shiyou; Naik, Rajesh R; Poirier, Gerald; Yao, Nan; Purohit, Prashant K; McAlpine, Michael C

2013-01-01

Piezoelectric nanowires are an important class of smart materials for next-generation applications including energy harvesting, robotic actuation, and bioMEMS. Lead zirconate titanate (PZT), in particular, has attracted significant attention, owing to its superior electromechanical conversion performance. Yet, the ability to synthesize crystalline PZT nanowires with well-controlled properties remains a challenge. Applications of common nanosynthesis methods to PZT are hampered by issues such as slow kinetics, lack of suitable catalysts, and harsh reaction conditions. Here we report a versatile biomimetic method, in which biotemplates are used to define PZT nanostructures, allowing for rational control over composition and crystallinity. Specifically, stoichiometric PZT nanowires were synthesized using both polysaccharide (alginate) and bacteriophage templates. The wires possessed measured piezoelectric constants of up to 132 pm/V after poling, among the highest reported for PZT nanomaterials. Further, integrated devices can generate up to 0.820 μW/cm(2) of power. These results suggest that biotemplated piezoelectric nanowires are attractive candidates for stimuli-responsive nanosensors, adaptive nanoactuators, and nanoscale energy harvesters.

Electric and ferroelectric properties of PZT/BLT multilayer films prepared by photochemical metal-organic deposition

NASA Astrophysics Data System (ADS)

Park, Hyeong-Ho; Lee, Hong-Sub; Park, Hyung-Ho; Hill, Ross H.; Hwang, Yun Taek

2009-01-01

The electric and ferroelectric properties of lead zirconate titanate (PZT) and lanthanum-substituted bismuth titanate (BLT) multilayer films prepared using photosensitive precursors were characterized. The electric and ferroelectric properties were investigated by studying the effect of the stacking order of four ferroelectric layers of PZT or BLT in 4-PZT, PZT/2-BLT/PZT, BLT/2-PZT/BLT, and 4-BLT multilayer films. The remnant polarization values of the 4-BLT and BLT/2-PZT/BLT multilayer films were 12 and 17 μC/cm 2, respectively. Improved ferroelectric properties of the PZT/BLT multilayer films were obtained by using a PZT intermediate layer. The films which contained a BLT layer on the Pt substrate had improved leakage currents of approximately two orders of magnitude and enhanced fatigue resistances compared to the films with a PZT layer on the Pt substrate. These improvements are due to the reduced number of defects and space charges near the Pt electrodes. The PZT/BLT multilayer films prepared by photochemical metal-organic deposition (PMOD) possessed enhanced electric and ferroelectric properties, and allow direct patterning to fabricate micro-patterned systems without dry etching.

Performance of PZT8 Versus PZT4 Piezoceramic Materials in Ultrasonic Transducers

NASA Astrophysics Data System (ADS)

DeAngelis, Dominick A.; Schulze, Gary W.

PZT8 and PZT4 are the common "hard" piezoceramic materials used in power ultrasonic transducers (e.g., welding, cutting, sonar, etc.). PZT8 is perceived as the better choice for resonant devices, primarily due to its higher mechanical quality factor Qm. PZT8 is also considered a "harder" material compared to PZT4, since it has better stability at higher preloads and drive levels. Many transducer designers never consider PZT4 for their applications, even though it has clear advantages such as higher output (i.e., higher d33). Even the perceived advantage of PZT8 regarding Qm may not be significant for most Langevin, bolted stack type transducers if the mechanical joint losses dominate. This research is a case study on the performance of identical ultrasonic transducers used for semiconductor wire bonding, assembled with either PZT8 or PZT4 materials. The main purpose of the study is to establish rule-of-thumb transducer design guidelines for the selection of PZT8 versus PZT4 materials. Several metrics are investigated such as impedance, frequency, capacitance, dielectric loss, Qm, heating, displacement gain, and electro-mechanical coupling factor. The experimental and theoretical research methods include Bode plots, thermal IR camera imaging, scanning laser vibrometry and coupled-field finite element analysis.

Electrical and ferroelectric properties of RF sputtered PZT/SBN on silicon for non-volatile memory applications

NASA Astrophysics Data System (ADS)

Singh, Prashant; Jha, Rajesh Kumar; Singh, Rajat Kumar; Singh, B. R.

2018-02-01

We report the integration of multilayer ferroelectric film deposited by RF magnetron sputtering and explore the electrical characteristics for its application as the gate of ferroelectric field effect transistor for non-volatile memories. PZT (Pb[Zr0.35Ti0.65]O3) and SBN (SrBi2Nb2O9) ferroelectric materials were selected for the stack fabrication due to their large polarization and fatigue free properties respectively. Electrical characterization has been carried out to obtain memory window, leakage current density, PUND and endurance characteristics. Fabricated multilayer ferroelectric film capacitor structure shows large memory window of 17.73 V and leakage current density of the order 10-6 A cm-2 for the voltage sweep of -30 to +30 V. This multilayer gate stack of PZT/SBN shows promising endurance property with no degradation in the remnant polarization for the read/write iteration cycles upto 108.

Lead zirconate titanate nanoscale patterning by ultraviolet-based lithography lift-off technique for nano-electromechanical system applications.

PubMed

Guillon, Samuel; Saya, Daisuke; Mazenq, Laurent; Costecalde, Jean; Rèmiens, Denis; Soyer, Caroline; Nicu, Liviu

2012-09-01

The advantage of using lead zirconate titanate (PbZr(0.54)Ti(0.46)O(3)) ceramics as an active material in nanoelectromechanical systems (NEMS) comes from its relatively high piezoelectric coefficients. However, its integration within a technological process is limited by the difficulty of structuring this material with submicrometer resolution at the wafer scale. In this work, we develop a specific patterning method based on optical lithography coupled with a dual-layer resist process. The main objective is to obtain sub-micrometer features by lifting off a 100-nm-thick PZT layer while preserving the material's piezoelectric properties. A subsequent result of the developed method is the ability to stack several layers with a lateral resolution of few tens of nanometers, which is mandatory for the fabrication of NEMS with integrated actuation and read-out capabilities.

Real-Time Performance of Mechatronic PZT Module Using Active Vibration Feedback Control.

PubMed

Aggogeri, Francesco; Borboni, Alberto; Merlo, Angelo; Pellegrini, Nicola; Ricatto, Raffaele

2016-09-25

This paper proposes an innovative mechatronic piezo-actuated module to control vibrations in modern machine tools. Vibrations represent one of the main issues that seriously compromise the quality of the workpiece. The active vibration control (AVC) device is composed of a host part integrated with sensors and actuators synchronized by a regulator; it is able to make a self-assessment and adjust to alterations in the environment. In particular, an innovative smart actuator has been designed and developed to satisfy machining requirements during active vibration control. This study presents the mechatronic model based on the kinematic and dynamic analysis of the AVC device. To ensure a real time performance, a H2-LQG controller has been developed and validated by simulations involving a machine tool, PZT actuator and controller models. The Hardware in the Loop (HIL) architecture is adopted to control and attenuate the vibrations. A set of experimental tests has been performed to validate the AVC module on a commercial machine tool. The feasibility of the real time vibration damping is demonstrated and the simulation accuracy is evaluated.

Real-Time Performance of Mechatronic PZT Module Using Active Vibration Feedback Control

PubMed Central

Aggogeri, Francesco; Borboni, Alberto; Merlo, Angelo; Pellegrini, Nicola; Ricatto, Raffaele

2016-01-01

This paper proposes an innovative mechatronic piezo-actuated module to control vibrations in modern machine tools. Vibrations represent one of the main issues that seriously compromise the quality of the workpiece. The active vibration control (AVC) device is composed of a host part integrated with sensors and actuators synchronized by a regulator; it is able to make a self-assessment and adjust to alterations in the environment. In particular, an innovative smart actuator has been designed and developed to satisfy machining requirements during active vibration control. This study presents the mechatronic model based on the kinematic and dynamic analysis of the AVC device. To ensure a real time performance, a H2-LQG controller has been developed and validated by simulations involving a machine tool, PZT actuator and controller models. The Hardware in the Loop (HIL) architecture is adopted to control and attenuate the vibrations. A set of experimental tests has been performed to validate the AVC module on a commercial machine tool. The feasibility of the real time vibration damping is demonstrated and the simulation accuracy is evaluated. PMID:27681732

Design and manufacture of a lightweight piezo-composite curved actuator

NASA Astrophysics Data System (ADS)

Yoon, K. Joon; Shin, Seokjun; Park, Hoon C.; Goo, Nam Seo

2002-02-01

In this paper we are concerned with the design, manufacture and performance test of a lightweight piezo-composite curved actuator (called LIPCA) using a top carbon fiber composite layer with near-zero coefficient of thermal expansion (CTE), a middle PZT ceramic wafer, and a bottom glass/epoxy layer with a high CTE. The main point of the design for LIPCA is to replace the heavy metal layers of THUNDERTM by lightweight fiber reinforced plastic layers without losing the capabilities for generating high force and large displacement. It is possible to save up to about 40% of the weight if we replace the metallic backing material by the light fiber composite layer. We can also have design flexibility by selecting the fiber direction and the size of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use an epoxy resin prepreg system. Glass/epoxy prepregs, a ceramic wafer with electrode surfaces, and a carbon prepreg were simply stacked and cured at an elevated temperature (177 °C) after following an autoclave bagging process. We found that the manufactured composite laminate device had a sufficient curvature after being detached from a flat mould. An analysis method using the classical lamination theory is presented to predict the curvature of LIPCA after curing at an elevated temperature. The predicted curvatures are in quite good agreement with the experimental values. In order to investigate the merits of LIPCA, performance tests of both LIPCA and THUNDERTM have been conducted under the same boundary conditions. From the experimental actuation tests, it was observed that the developed actuator could generate larger actuation displacement than THUNDERTM.

Transverse piezoelectric coefficient measurement of flexible lead zirconate titanate thin films

DOE Office of Scientific and Technical Information (OSTI.GOV)

Dufay, T.; Guiffard, B.; Seveno, R.

Highly flexible lead zirconate titanate, Pb(Zr,Ti)O{sub 3} (PZT), thin films have been realized by modified sol-gel process. The transverse piezoelectric coefficient d{sub 31} was determined from the tip displacement of bending-mode actuators made of PZT cantilever deposited onto bare or RuO{sub 2} coated aluminium substrate (16 μm thick). The influence of the thickness of ruthenium dioxide RuO{sub 2} and PZT layers was investigated for Pb(Zr{sub 0.57}Ti{sub 0.43})O{sub 3}. The modification of Zr/Ti ratio from 40/60 to 60/40 was done for 3 μm thick PZT thin films onto aluminium (Al) and Al/RuO{sub 2} substrates. A laser vibrometer was used to measure the beammore » displacement under controlled electric field. The experimental results were fitted in order to find the piezoelectric coefficient. Very large tip deflections of about 1 mm under low voltage (∼8 V) were measured for every cantilevers at the resonance frequency (∼180 Hz). For a given Zr/Ti ratio of 58/42, it was found that the addition of a 40 nm thick RuO{sub 2} interfacial layer between the aluminium substrate and the PZT layer induces a remarkable increase of the d{sub 31} coefficient by a factor of 2.7, thus corresponding to a maximal d{sub 31} value of 33 pC/N. These results make the recently developed PZT/Al thin films very attractive for both low frequency bending mode actuating applications and vibrating energy harvesting.« less

Fatigue responses of lead zirconate titanate stacks under semibipolar electric cycling with mechanical preload

NASA Astrophysics Data System (ADS)

Wang, Hong; Cooper, Thomas A.; Lin, Hua-Tay; Wereszczak, Andrew A.

2010-10-01

Lead zirconate titanate (PZT) stacks that had an interdigital internal electrode configuration were tested to more than 108 cycles. A 100 Hz semibipolar sine wave with a field range of +4.5/-0.9 kV/mm was used in cycling with a concurrently-applied 20 MPa preload. Significant reductions in piezoelectric and dielectric responses were observed during the cycling depending on the measuring condition. Extensive partial discharges were also observed. These surface events resulted in the erosion of external electrode and the exposure of internal electrodes. Sections prepared by sequential polishing technique revealed a variety of damage mechanisms including delaminations, pores, and etch grooves. The scale of damage was correlated with the degree of fatigue-induced reduction in piezoelectric and dielectric responses. The results from this study demonstrate the feasibility of using a semibipolar mode to drive a PZT stack under a mechanical preload and illustrate the potential fatigue and damages of the stack in service.

Automated manufacturing process for DEAP stack-actuators

NASA Astrophysics Data System (ADS)

Tepel, Dominik; Hoffstadt, Thorben; Maas, Jürgen

2014-03-01

Dielectric elastomers (DE) are thin polymer films belonging to the class of electroactive polymers (EAP), which are coated with compliant and conductive electrodes on each side. Due to the influence of an electrical field, dielectric elastomers perform a large amount of deformation. In this contribution a manufacturing process of automated fabricated stack-actuators based on dielectric electroactive polymers (DEAP) are presented. First of all the specific design of the considered stack-actuator is explained and afterwards the development, construction and realization of an automated manufacturing process is presented in detail. By applying this automated process, stack-actuators with reproducible and homogeneous properties can be manufactured. Finally, first DEAP actuator modules fabricated by the mentioned process are validated experimentally.

Portable Sensor for Detecting Microbubbles in Real Time to Prevent Decompression Sickness for Safe Diving During Subaquatic Navy Activities

DTIC Science & Technology

2015-03-17

different manner as to what it was  originally proposed. The  hyaluronic   acid  was degassed prior to filling and bubbles were  introduced in a controlled...in the PZT when the PZT is actuated when the bubble crosses the PZT center. Some experiments were conducted with water, others with hyaluronic acid ...at 0.66% and with hyaluronic acid at 1.05%. Also, 38 of these experiments also monitored the signal of 3 pill microphones. 25 additional experiments

Lead-free piezoceramics.

PubMed

Saito, Yasuyoshi; Takao, Hisaaki; Tani, Toshihiko; Nonoyama, Tatsuhiko; Takatori, Kazumasa; Homma, Takahiko; Nagaya, Toshiatsu; Nakamura, Masaya

2004-11-04

Lead has recently been expelled from many commercial applications and materials (for example, from solder, glass and pottery glaze) owing to concerns regarding its toxicity. Lead zirconium titanate (PZT) ceramics are high-performance piezoelectric materials, which are widely used in sensors, actuators and other electronic devices; they contain more than 60 weight per cent lead. Although there has been a concerted effort to develop lead-free piezoelectric ceramics, no effective alternative to PZT has yet been found. Here we report a lead-free piezoelectric ceramic with an electric-field-induced strain comparable to typical actuator-grade PZT. We achieved this through the combination of the discovery of a morphotropic phase boundary in an alkaline niobate-based perovskite solid solution, and the development of a processing route leading to highly <001> textured polycrystals. The ceramic exhibits a piezoelectric constant d33 (the induced charge per unit force applied in the same direction) of above 300 picocoulombs per newton (pC N(-1)), and texturing the material leads to a peak d33 of 416 pC N(-1). The textured material also exhibits temperature-independent field-induced strain characteristics.

Thin-disk piezoceramic ultrasonic motor. Part I: design and performance evaluation.

PubMed

Wen, Fuh Liang; Yen, Chi Yung; Ouyang, Minsun

2003-08-01

The purpose of this study is to gain the knowledge and experience in the design of thin-disk piezoceramic-driving ultrasonic actuator dedicated. In this paper, the design and construction of an innovative ultrasonic actuator is developed as a stator, which is a composite structure consisting of piezoceramic (PZT) membrane bonded on a metal sheet. Such a concentric PZT structure possesses the electrical and mechanical coupling characteristics in flexural wave. The driving ability of the actuator comes from the mechanical vibration of extension and shrinkage of a metal sheet due to the converse piezoelectric effect, corresponding to the frequency of a single-phase AC power. By applying the constraints on the specific geometry positions on the metal sheet, the various behaviors of flexural waves have been at the different directions. The rotor is impelled by the actuator with rotational speeds of 600 rpm in maximum using a friction-contact mechanism. Very high actuating and braking abilities are obtained. This simple and inexpensive structure of actuator demonstrates that the mechanical design of actuator and rotor could be done separately and flexibly according to the requirements for various applications. And, its running accuracy and positioning precision are described in Part II.A closed loop servo positioning control i.e. sliding mode control (SMC) is used to compensate automatically for nonlinearly mechanical behaviors such as dry friction, ultrasonic vibrating, slip-stick phenomena. Additionally, SMC scheme has been successfully applied to position tracking to prove the excellent robust performance in noise rejection.

Advances in Lead-Free Piezoelectric Materials for Sensors and Actuators

PubMed Central

Aksel, Elena; Jones, Jacob L.

2010-01-01

Piezoelectrics have widespread use in today’s sensor and actuator technologies. However, most commercially available piezoelectric materials, e.g., Pb [ZrxTi1−x] O3 (PZT), are comprised of more than 60 weight percent lead (Pb). Due to its harmful effects, there is a strong impetus to identify new lead-free replacement materials with comparable properties to those of PZT. This review highlights recent developments in several lead-free piezoelectric materials including BaTiO3, Na0.5Bi0.5TiO3, K0.5Bi0.5TiO3, Na0.5K0.5NbO3, and their solid solutions. The factors that contribute to strong piezoelectric behavior are described and a summary of the properties for the various systems is provided. PMID:22294907

Active control of structures using macro-fiber composite (MFC)

NASA Astrophysics Data System (ADS)

Kovalovs, A.; Barkanov, E.; Gluhihs, S.

2007-12-01

This paper presents the use of macro-fiber composites (MFC) for vibration reduces of structures. The MFC consist of polyimid films with IDE-electrodes that are glued on the top and the bottom of rectangular piezoceramic fibers. The interdigitated electrodes deliver the electric field required to activate the piezoelectric effect in the fibers and allows to invoke the stronger longitudinal piezoelectric effect along the length of the fibers. When this actuator embedded in a surface or attached to flexible structures, the MFC actuator provides distributed solid-state deflection and vibration control. The major advantages of the piezoelectric fibre composite actuators are their high performance, flexibility, and durability when compared with the traditional piezoceramic (PZT) actuators. In addition, the ability of MFC devices to couple the electrical and mechanical fields is larger than in monolithic PZT. In this study, we showed the experimental results that an MFC could be used as actuator to find modal parameters and reduce vibration for structures such as an aluminium beam and metal music plate. Two MFC actuators were attached to the surfaces of test subjects. First MFC actuator used to supply a signal as exciter of vibration and second MFC show his application for reduction of vibration in the range of resonance frequencies. Experimental results of aluminium beam with MFC actuators compared with finite element model which modelled in ANSYS software. The applied voltage is modelled as a thermal load according to thermal analogy for MFC. The experimental and numerical results presented in this paper confirm the potential of MFC for use in the vibration control of structures.

A novel application of dielectric stack actuators: a pumping micromixer

NASA Astrophysics Data System (ADS)

Solano-Arana, Susana; Klug, Florian; Mößinger, Holger; Förster-Zügel, Florentine; Schlaak, Helmut F.

2018-07-01

The fabrication of pumping micromixers as a novel application of dielectric stack actuators is proposed in this work. DEA micromixers can be valuable for medical and pharmaceutical applications, due to: firstly, the biocompatibility of the used materials (PDMS and graphite); secondly, the pumping is done with peristaltic movements, allowing only the walls of the channel to be in contact with the liquid, avoiding possible contamination from external parts; and thirdly, the low flow velocity in the micromixers required in many applications. The micromixer based on peristasltic movements will not only mix, but also pump the fluids in and out the device. The developed device is a hybrid micromixer: active, because it needs a voltage source to enhance the quality and speed of the mixing; and passive, with a similar shape to the well-known Y-type micromixers. The proposed micromixer is based on twelve stack actuators distributed in: two pumping chambers, consisting of four stack actuators in series; and a mixing chamber, made of four consecutive stack actuators with 30 layers per stack. The DEA micromixer is able to mix two solutions with a flow rate of 21.5 μl min–1 at the outlet, applying 1500 V at 10 Hz and actuating two actuators at a time.

Simple piezoelectric-actuated mirror with 180 kHz servo bandwidth.

PubMed

Briles, Travis C; Yost, Dylan C; Cingöz, Arman; Ye, Jun; Schibli, Thomas R

2010-05-10

We present a high bandwidth piezoelectric-actuated mirror for length stabilization of an optical cavity. The actuator displays a transfer function with a flat amplitude response and greater than 135 masculine phase margin up to 200 kHz, allowing a 180 kHz unity gain frequency to be achieved in a closed servo loop. To the best of our knowledge, this actuator has achieved the largest servo bandwidth for a piezoelectric transducer (PZT). The actuator should be very useful in a wide variety of applications requiring precision control of optical lengths, including laser frequency stabilization, optical interferometers, and optical communications. (c) 2010 Optical Society of America.

Lamb Wave Propagation in a Restricted Geometry Composite PI-Joint Specimen (Preprint)

DTIC Science & Technology

2011-11-01

adhesive, and were located along the length and height of the specimen as depicted in Figure 3. The sensors were 6.35 mm round disks of PZT , with a...in both cases for R1, R2, and R3. 3D Finite Element Model Geometry 200mm length 50mm width 140mm height x z y PZT Actuation Sensor...health monitoring using scanning laser vibrometry: III. Lamb waves for fatigue crack detection”, Smart Mater. Struct., Vol. 14, No. 6, 2005. 16

Broadband pulsed flow using piezoelectric microjets

NASA Astrophysics Data System (ADS)

Hogue, Joshua; Solomon, John; Hays, Michael; Alvi, Farrukh; Oates, William

2010-04-01

A piezohydraulic microjet design and experimental results are presented to demonstrate broadband active flow control for applications on various aircraft structures including impinging jets, rotor blades, cavity bays, etc. The microjet actuator includes a piezoelectric stack actuator and hydraulic circuit that is used to throttle a 400 μm diameter microjet using hydraulic amplification of the piezoelectric stack actuator. This system is shown to provide broadband pulsed flow actuation up to 800 Hz. Unsteady pressure measurements of the microjet's exit flow are coupled with high-speed phase imagery using micro-Schlieren techniques to quantify the flow field. These results are compared with in situ stack actuator displacements using strain gauge measurements.

Wafer-scale growth of highly textured piezoelectric thin films by pulsed laser deposition for micro-scale sensors and actuators

NASA Astrophysics Data System (ADS)

Nguyen, M. D.; Tiggelaar, R.; Aukes, T.; Rijnders, G.; Roelof, G.

2017-11-01

Piezoelectric lead-zirconate-titanate (PZT) thin films were deposited on 4-inch (111)Pt/Ti/SiO2/Si(001) wafers using large-area pulsed laser deposition (PLD). This study was focused on the homogeneity in film thickness, microstructure, ferroelectric and piezoelectric properties of PZT thin films. The results indicated that the highly textured (001)-oriented PZT thin films with wafer-scale thickness homogeneity (990 nm ± 0.8%) were obtained. The films were fabricated into piezoelectric cantilevers through a MEMS microfabrication process. The measured longitudinal piezoelectric coefficient (d 33f = 210 pm/V ± 1.6%) and piezoelectric transverse coefficient (e 31f = -18.8 C/m2 ± 2.8%) were high and homogeneity across wafers. The high piezoelectric properties on Si wafers will extend industrial application of PZT thin films and further development of piezoMEMS.

Experimental characterization of PZT fibers using IDE electrodes

NASA Astrophysics Data System (ADS)

Wyckoff, Nicholas; Ben Atitallah, Hassene; Ounaies, Zoubeida

2016-04-01

Lead zirconate titanate (PZT) fibers are mainly used in active fiber composites (AFC) where they are embedded in a polymer matrix. Interdigitated electrodes (IDE) along the direction of the fibers are used to achieve planar actuation, hereby exploiting the d33 coefficient of PZT. When embedded in the AFC, the PZT fibers are subjected to mechanical loading as well as non-uniform electric field as a result of the IDEs. Therefore, it is important to characterize the electrical and electromechanical behavior of these fibers ex-situ using the IDE electrodes to assess the impact of nonuniform electric field on the properties of the fibers. For that reason, this work aims at quantifying the impact of IDE electrodes on the electrical and electromechanical behavior of PZT fibers, which is necessary for their successful implementation in devices like AFC. The tested fibers were purchased from Advanced Cerametrics and they have an average diameter of 250 micrometers. The IDE electrodes were screen printed on an acrylic substrate. The PZT fibers were subjected to frequency sweeps at low voltages to determine permittivity for parallel and interdigitated electrodes. The piezoelectric e33 constant is determined from electromechanical testing of PZT fibers in parallel electrodes to compare the electromechanical behavior for PZT in bulk and fiber form. The dielectric constant and e33 were found to be lower for the IDE and parallel electrodes compared to bulk but comparable to results published in literature.

Cryogenic Piezoelectric Actuator

NASA Technical Reports Server (NTRS)

Jiang, Xiaoning; Cook, William B.; Hackenberger, Wesley S.

2009-01-01

In this paper, PMN-PT single crystal piezoelectric stack actuators and flextensional actuators were designed, prototyped and characterized for space optics applications. Single crystal stack actuators with footprint of 10 mm x10 mm and the height of 50 mm were assembled using 10 mm x10mm x0.15mm PMN-PT plates. These actuators showed stroke > 65 - 85 microns at 150 V at room temperature, and > 30 microns stroke at 77 K. Flextensional actuators with dimension of 10mm x 5 mm x 7.6 mm showed stroke of >50 microns at room temperature at driving voltage of 150 V. A flextensional stack actuator with dimension of 10 mm x 5 mm x 47 mm showed stroke of approx. 285 microns at 150 V at room temperature and > 100 microns at 77K under driving of 150 V should be expected. The large cryogenic stroke and high precision of these actuators are promising for cryogenic optics applications.

High-temperature crystallized thin-film PZT on thin polyimide substrates

NASA Astrophysics Data System (ADS)

Liu, Tianning; Wallace, Margeaux; Trolier-McKinstry, Susan; Jackson, Thomas N.

2017-10-01

Flexible piezoelectric thin films on polymeric substrates provide advantages in sensing, actuating, and energy harvesting applications. However, direct deposition of many inorganic piezoelectric materials such as Pb(Zrx,Ti1-x)O3 (PZT) on polymers is challenging due to the high temperature required for crystallization. This paper describes a transfer process for PZT thin films. The PZT films are first grown on a high-temperature capable substrate such as platinum-coated silicon. After crystallization, a polymeric layer is added, and the polymer-PZT combination is removed from the high-temperature substrate by etching away a release layer, with the polymer layer then becoming the substrate. The released PZT on polyimide exhibits enhanced dielectric response due to reduction in substrate clamping after removal from the rigid substrate. For Pb(Zr0.52,Ti0.48)0.98Nb0.02O3 films, release from Si increased the remanent polarization from 17.5 μC/cm2 to 26 μC/cm2. In addition, poling led to increased ferroelastic/ferroelectric realignment in the released films. At 1 kHz, the average permittivity was measured to be around 1160 after release from Si with a loss tangent below 3%. Rayleigh measurements further confirmed the correlation between diminished substrate constraint and increased domain wall mobility in the released PZT films on polymers.

Large actuation strain over 0.3% in periodically orthogonal poled BaTiO3 ceramics and multilayer actuators via reversible domain switching

NASA Astrophysics Data System (ADS)

Wang, Qiangzhong; Li, Faxin

2018-06-01

Lead titanate zirconate (PZT) ceramics based piezoelectric actuators always suffer from small output strains (typically 0.1%–0.15%) and have recently been criticized for the toxicity problem of the high-concentration lead. In our recent work (Li et al 2017 J. Appl. Phys. 122 074103), we realized large local actuation strain nearly 0.6% in a periodically orthogonal poled (POP) PZT ceramics via reversible domain switching. In this work, we applied the POP method to barium titanate (BT) ceramics and proposed a specially designed multilayer actuator which can output large uniform strain. The simple tetragonal structure of BT ceramics makes it easier to understand the mechanism of reversible domain switching in POP ceramics and its lead-free characteristic is more promising. Firstly, a POP BT ceramic piece was fabricated and the actuation testing results show that local large actuation strain of 0.36% can be obtained under a field of 2 kV mm‑1 at 0.1 Hz. However, the actuation strain is non-uniform along the period direction, varying from 0.22% to 0.36%. Then, to output uniform large strain, a four-layer actuator based on the POP BT ceramics was designed and fabricated in which only the in-plane poled regions of the adjacent layers were bonded. Results show that the output strain turns to be uniform in this way, which is 0.34% under 2 kV mm‑1, resulting in a very high large-signal (=S max/E max) of 1700 pm V‑1. The large actuation strain is very stable and keeps unchanged after 20k cycles of operation. It drops quickly with the increasing frequency and is stabilized at 0.18% above 1.0 Hz. Finally, bipolar field testing was conducted on the POP BT based actuator. Results show that the actuator shows electrostriction-like symmetric bipolar actuation behavior with the repeatable actuation strain of 0.3% under 2 kV mm‑1. This work may provide a feasible solution to low frequency, large-strain lead-free piezoelectric actuation.

Prestressed curved actuators: characterization and modeling of their piezoelectric behavior

NASA Astrophysics Data System (ADS)

Mossi, Karla M.; Ounaies, Zoubeida; Smith, Ralph C.; Ball, Brian

2003-08-01

Pre-stressed curved actuators consist of a piezoelectric ceramic (lead zirconate titanate or PZT) sandwiched between various substrates and other top layers. In one configuration, the substrates are stainless steel with a top layer made with aluminum (THUNDER). In another configuration, the substrates and top are based on fiberglass and carbon composite layers (Lipca-C2). Due to their enhanced strain capabilities, these pre-stressed piezoelectric devices are of interest in a variety of aerospace applications. Their performance as a function of electric field, temperature and frequency is needed in order to optimize their operation. During the processing steps, a mismatch between the properties of the various layers leads to pre-stressing of the PZT layer. These internal stresses, combined with restricted lateral motion, are shown to enhance the axial displacement. The goal is to gain an understanding of the resulting piezoelectric behavior over a range of voltages, and frequencies. A nonlinear model, which quantifies the displacements generated in THUNDER actuators in response to applied voltages for a variety of boundary conditions, is developed. The model utilizes a hysteretic electric field-polarization relationship and predicts displacements based on the geometry and physical characteristics of the actuator components. The accuracy of the model and associated numerical method is demonstrated through comparison with experimental data.

Development of blood extraction system for health monitoring system

NASA Astrophysics Data System (ADS)

Tsuchiya, Kazuyoshi; Nakanishi, Naoyuki; Nakamachi, Eiji

2004-03-01

The purpose of this research is to develop the compact human blood sampling device applied for a health monitoring system(HMS), which is called "Mobile Hospital". The HMS consists of (1) a micro electrical pumping system for blood extraction, (2) a bio-sensor to detect and evaluate an amount of Glucose, Cholesterol and Urea in extracted blood, by using enzyme such as Glucoseoxidase (GOD), Cholesteroloxidase and Urease. The mechanical design elements of the device are bio-compatible microneedle, indentation unit using a shape memory alloy(SMA) actuator and pumping unit using a piezoelectric microactuator. The design concept is the biomimetic micromachine of female mosquito"s blood sampling mechanism. The performances of the main mechanical elements such as indentation force of the microneedle, actual stroke of the indentation unit using a SMA actuator and liquid sampling ability of the pumping unit using PZT piezoelectric microactuator were measured. The 3 mm stroke of the indentation load generated by SMA actuator was 0.8mN. The amount of imitation blood extracted by using bimorph PZT actuators was about 0.5 microliters for 10 sec. A 60-micrometer outer diameter and 25-micrometer inner diameter Titanium microneedle, which size is same as female mosquito"s labium, was produced by sputter deposition.

Smooth adaptive sliding mode vibration control of a flexible parallel manipulator with multiple smart linkages in modal space

NASA Astrophysics Data System (ADS)

Zhang, Quan; Li, Chaodong; Zhang, Jiantao; Zhang, Jianhui

2017-12-01

This paper addresses the dynamic model and active vibration control of a rigid-flexible parallel manipulator with three smart links actuated by three linear ultrasonic motors. To suppress the vibration of three flexible intermediate links under high speed and acceleration, multiple Lead Zirconium Titanate (PZT) sensors and actuators are collocated mounted on each link, forming a smart structure which can achieve self-sensing and self-actuating. The dynamic characteristics and equations of the flexible link incorporated with the PZT sensors and actuator are analyzed and formulated. The smooth adaptive sliding mode based active vibration control is proposed to suppress the vibration of the smart links, and the first and second modes of the three links are targeted to be suppressed in modal space to avoid the spillover phenomenon. Simulations and experiments are implemented to validate the effectiveness of the smart structures and the proposed control laws. Experimental results show that the vibration of the first mode around 92 Hz and the second mode around 240 Hz of the three smart links are reduced respectively by 64.98%, 59.47%, 62.28%, and 45.80%, 36.79%, 33.33%, which further verify the multi-mode vibration control ability of the smooth adaptive sliding mode control law.

Thickness ratio effects on quasistatic actuation and sensing behavior of laminate magnetoelectric cantilevers

NASA Astrophysics Data System (ADS)

Wang, Yezuo; Atulasimha, Jayasimha; Clarke, Joshua; Sundaresan, Vishnu B.

2010-04-01

In this work, the magnetoelectric cantilever composed of a layer of Galfenol and a layer of PZT-5H is studied for novel applications such as surgical ablation tools and cutting tools for machining applications. For developing a suitable model for the magnetoelectric cantilever, an energy based approach for the non-linear constitutive behavior of the magnetostrictive material and linear piezoelectric constitutive equations will be coupled with Euler Bernoulli model for composite beams. The cantilever is held in a uniform magnetic field and the magnetic field is measured by a Gaussmeter. The tip-deflection of the cantilever is detected by a laser triangulation sensor. The piezoelectric response can be studied with low noise preamplifier. Four PZT-5H layers with different thickness are separately bonded on the top of the same Galfenol layer and characterized to study the thickness ratio effects on the quasistatic actuation and sensing behavior of the composite cantilever.

Improvement of fatigue resistance for multilayer lead zirconate titanate (PZT)-based ceramic actuators by external mechanical loads

NASA Astrophysics Data System (ADS)

Yang, Gang; Yue, Zhenxing; Ji, Ye; Chu, Xiangcheng; Li, Longtu

2008-12-01

The influence of external compressive loads, applied along a direction perpendicular to polarization, on fatigue behaviors of multilayer lead zirconate titanate (PZT)-based ceramic actuators was investigated. Under no external mechanical load, a normal fatigue behavior was observed, demonstrating that both switching polarization (Pswitching) and remnant polarization (Pr) progressively decreased with increasing switching cycles due to domain pinning by charge point defects. However, an anomalous enhancement in both switching and remnant polarizations was observed upon application of the external compressive loads. After 5×106 cycles of polarization switching, Pswitching and Pr increase by about 13% and 6% at 40 MPa, respectively, while Pswitching and Pr increase by about 11% and 21% at 60 MPa, respectively. The improvement of fatigue resistance can be attributed to non-180° domain switching and suppression of microcracking, triggered by external mechanical loads.

Stroke maximizing and high efficient hysteresis hybrid modeling for a rhombic piezoelectric actuator

NASA Astrophysics Data System (ADS)

Shao, Shubao; Xu, Minglong; Zhang, Shuwen; Xie, Shilin

2016-06-01

Rhombic piezoelectric actuator (RPA), which employs a rhombic mechanism to amplify the small stroke of PZT stack, has been widely used in many micro-positioning machineries due to its remarkable properties such as high displacement resolution and compact structure. In order to achieve large actuation range along with high accuracy, the stroke maximizing and compensation for the hysteresis are two concerns in the use of RPA. However, existing maximization methods based on theoretical model can hardly accurately predict the maximum stroke of RPA because of approximation errors that are caused by the simplifications that must be made in the analysis. Moreover, despite the high hysteresis modeling accuracy of Preisach model, its modeling procedure is trivial and time-consuming since a large set of experimental data is required to determine the model parameters. In our research, to improve the accuracy of theoretical model of RPA, the approximation theory is employed in which the approximation errors can be compensated by two dimensionless coefficients. To simplify the hysteresis modeling procedure, a hybrid modeling method is proposed in which the parameters of Preisach model can be identified from only a small set of experimental data by using the combination of discrete Preisach model (DPM) with particle swarm optimization (PSO) algorithm. The proposed novel hybrid modeling method can not only model the hysteresis with considerable accuracy but also significantly simplified the modeling procedure. Finally, the inversion of hysteresis is introduced to compensate for the hysteresis non-linearity of RPA, and consequently a pseudo-linear system can be obtained.

Performance of PIN-PMN-PT Single Crystal Piezoelectric versus PZT8 Piezoceramic Materials in Ultrasonic Transducers

NASA Astrophysics Data System (ADS)

DeAngelis, D. A.; Schulze, G. W.

The recent advancements in the manufacturing of single crystal PIN-PMN-PT piezoelectric materials now make them a cost-competitive alternative to PZT4 and PZT8 (Navy Types I and III) piezoceramic materials, which have been the workhorse of power ultrasonic applications (e.g., welding, cutting, sonar, etc.) for over 50 years. Although there are great benefits to the use of single crystal materials with respect to high output, as well as added actuating and sensing abilities, many transducer designers are still reluctant to explore these materials due to inadequate design guidelines for substituting the familiar PZT materials; for example, what are the implications of the higher capacitance, sensitivity to chipping/cracks, aging effects, frequency shifts, or how much preload can be used are all common questions. This research is a case study on the performance of identical ultrasonic transducer bodies, used for semiconductor wire bonding, assembled with either PZT8 or PIN-PMN-PT piezo material. The main purpose of the study is to establish rule-of-thumb design guidelines for direct substitution of single crystal materials in existing PZT8 transducer designs, along with a side-by-side performance comparison to highlight benefits. Several metrics are investigated such as impedance, frequency, displacement gain, quality factor and electromechanical coupling factor.

Pulsed laser deposition of piezoelectric lead zirconate titanate thin films maintaining a post-CMOS compatible thermal budget

NASA Astrophysics Data System (ADS)

Schatz, A.; Pantel, D.; Hanemann, T.

2017-09-01

Integration of lead zirconate titanate (Pb[Zrx,Ti1-x]O3 - PZT) thin films on complementary metal-oxide semiconductor substrates (CMOS) is difficult due to the usually high crystallization temperature of the piezoelectric perovskite PZT phase, which harms the CMOS circuits. In this work, a wafer-scale pulsed laser deposition tool was used to grow 1 μm thick PZT thin films on 150 mm diameter silicon wafers. Three different routes towards a post-CMOS compatible deposition process were investigated, maintaining a post-CMOS compatible thermal budget limit of 445 °C for 1 h (or 420 °C for 6 h). By crystallizing the perovskite LaNiO3 seed layer at 445 °C, the PZT deposition temperature can be lowered to below 400 °C, yielding a transverse piezoelectric coefficient e31,f of -9.3 C/m2. With the same procedure, applying a slightly higher PZT deposition temperature of 420 °C, an e31,f of -10.3 C/m2 can be reached. The low leakage current density of below 3 × 10-6 A/cm2 at 200 kV/cm allows for application of the post-CMOS compatible PZT thin films in low power micro-electro-mechanical-systems actuators.

Application of Multiplexed FBG and PZT Impedance Sensors for Health Monitoring of Rocks

PubMed Central

Yang, Yaowen; Annamdas, Venu Gopal Madhav; Wang, Chao; Zhou, Yingxin

2008-01-01

Reliable structural health monitoring (SHM) including nondestructive evaluation (NDE) is essential for safe operation of infrastructure systems. Effective monitoring of the rock components of civil infrastructures such as tunnels and caverns remains challenging. The feasibility of employing smart optical fibre sensor (OFS) and piezoelectric impedance sensor made up of lead zirconate titanate (PZT) for comprehensive health monitoring of rocks, covering load history monitoring/retrieval as well as damage assessment is presented in this paper. The rock specimens are subjected to cyclic loading and their conditions are continuously monitored using OFS and PZT sensors. OFS based multiplexed fibre Bragg grating (FBG) sensors are surface bonded on the rock specimens. Their strain sensing performance is compared with the conventional electric strain gauges (ESGs). In addition, PZT patches are also bonded on the specimens to study the damage pattern during different loading cycles. Unlike the FBGs or ESGs, PZT patches are used as bi-functional sensors and actuators, enabling them to be efficient detectors of incipient damages using the principle of electromechanical impedance. The experimental study demonstrated superior performance of these smart FBG and PZT impedance sensors. This work is expected to be useful for SHM based NDE application of rock structures such as caverns and tunnels. PMID:27879708

Feasibility of using PZT actuators to study the dynamic behavior of a rotating disk due to rotor-stator interaction.

PubMed

Presas, Alexandre; Egusquiza, Eduard; Valero, Carme; Valentin, David; Seidel, Ulrich

2014-07-07

In this paper, PZT actuators are used to study the dynamic behavior of a rotating disk structure due to rotor-stator interaction excitation. The disk is studied with two different surrounding fluids-air and water. The study has been performed analytically and validated experimentally. For the theoretical analysis, the natural frequencies and the associated mode shapes of the rotating disk in air and water are obtained with the Kirchhoff-Love thin plate theory coupled with the interaction with the surrounding fluid. A model for the Rotor Stator Interaction that occurs in many rotating disk-like parts of turbomachinery such as compressors, hydraulic runners or alternators is presented. The dynamic behavior of the rotating disk due to this excitation is deduced. For the experimental analysis a test rig has been developed. It consists of a stainless steel disk (r = 198 mm and h = 8 mm) connected to a variable speed motor. Excitation and response are measured from the rotating system. For the rotating excitation four piezoelectric patches have been used. Calibrating the piezoelectric patches in amplitude and phase, different rotating excitation patterns are applied on the rotating disk in air and in water. Results show the feasibility of using PZT to control the response of the disk due to a rotor-stator interaction.

Preliminary Design and Evaluation of an Airfoil with Continuous Trailing-Edge Flap

NASA Technical Reports Server (NTRS)

Shen, Jinwei; Thornburgh, Robert P.; Kreshock, Andrew R.; Wilbur, Matthew L.; Liu, Yi

2012-01-01

This paper presents the preliminary design and evaluation of an airfoil with active continuous trailing-edge flap (CTEF) as a potential rotorcraft active control device. The development of structural cross-section models of a continuous trailing-edge flap airfoil is described. The CTEF deformations with MFC actuation are predicted by NASTRAN and UM/VABS analyses. Good agreement is shown between the predictions from the two analyses. Approximately two degrees of CTEF deflection, defined as the rotation angle of the trailing edge, is achieved with the baseline MFC-PZT bender. The 2D aerodynamic characteristics of the continuous trailing-edge flap are evaluated using a CFD analysis. The aerodynamic efficiency of a continuous trailing-edge flap is compared to that of a conventional discrete trailing-edge flap (DTEF). It is found that the aerodynamic characteristics of a CTEF are equivalent to those of a conventional DTEF with the same deflection angle but with a smaller flap chord. A fluid structure interaction procedure is implemented to predict the deflection of the continuous trailingedge flap under aerodynamic pressure. The reductions in CTEF deflection are overall small when aerodynamic pressure is applied: 2.7% reduction is shown with a CTEF deflection angle of two degrees and at angle of attack of six degrees. In addition, newly developed MFC-PMN actuator is found to be a good supplement to MFC-PZT when applied as the bender outside layers. A mixed MFC-PZT and MFC-PMN bender generates 3% more CTEF deformation than an MFC-PZT only bender and 5% more than an MFC-PMN only bender under aerodynamic loads.

Local piezoelectric behavior in PZT-based thin films for ultrasound transducers

NASA Astrophysics Data System (ADS)

Griggio, Flavio

Piezoelectric microelectromechanical systems (MEMS) are currently used in inkjet printers and precision resonators; numerous additional applications are being investigated for sensors, low-voltage actuators, and transducers. This work was aimed at improving piezoelectric MEMS by taking two approaches: 1) identifying factors affecting the piezoelectric response of ferroelectric thin films and 2) demonstrating integration of these films into a high frequency array transducer. It was found that there are several key factors influencing the piezoelectric response of thin films for a given material composition. First, large grain size improves the piezoelectric response. This was demonstrated using chemical solution deposited lead nickel niobate -- lead zirconate titanate (0.3)Pb(Ni 0.33Nb0.67)O3 - (0.7)Pb(Zr0.45Ti 0.55O3), (PNN-PZT) ferroelectric thin films. It was shown that this composition allows greater microstructural control than does PZT. Dielectric permittivities ranging from 1350 to 1520 and a transverse piezoelectric coefficient e31,f as high as -- 9.7 C/m 2 were observed for films of about 0.25 mum in thickness. The permittivity and piezoelectric response as well as extrinsic contributions to the dielectric constant increased by 14 and 12 % respectively for samples with grain sizes ranging from 110 to 270 nm. A second factor influencing the piezoelectric response is film composition with respect to the morphotropic phase boundary (MPB). The composition dependence of the dielectric and piezoelectric nonlinearities was characterized in epitaxially grown (0.3)Pb(Ni0.33Nb0.67)O3-(0.7)Pb(Zr xTi1-xO3) thin films deposited on SrTiO 3 to minimize the influence of large-angle grain boundaries. Tetragonal, MPB and rhombohedral films were prepared by changing the Zr/Ti ratio. The largest dielectric and piezoelectric nonlinearities were observed for the rhombohedral sample; this resulted from a higher domain wall mobility due to a smaller ferroelectric distortion and superior crystal quality. Thirdly, changes in the mechanical boundary conditions experienced by a ferroelectric thin film were found to influence both the properties and the length scale for correlated motion of domain walls. Microfabrication was employed to release the PZT films from the Si substrate. Nonlinear piezoelectric maps, by band excitation piezoforce microscopy, showed formation of clusters of higher nonlinear activities of similar size for clamped PZT films with different microstructures. However PZT films that had been released from the Si substrate showed a distinct increase in the correlation length associated with coupled domain wall motion, suggesting that the local mechanical boundary conditions, more than microstructure or composition govern the domain wall dynamics. Release of both the local and the global stress states in films produced dielectric nonlinearities comparable to those of bulk ceramics. The second research direction was targeted at demonstrating the functionality of a one dimensional transducer array. A diaphragm geometry was used for the transducer arrays in order to benefit from the unimorph-type displacement of the PZT-SiO2 layers. For this purpose, the PZT and remaining films in the stack were patterned using reactive ion etching and partially released from the underlying silicon substrate by XeF2 etching from the top. Admittance measurements on the fabricated structures showed resonance frequencies at ˜40 MHz for a 80 mum diameter-wide diaphragms with a PZT thickness of 1.74 mum. In-water transmit and receive functionalities were demonstrated. A bandwidth on receive of 80 % centered at 40 MHz was determined during pitch-mode tests.

Design and analysis of a 3D Elliptical Micro-Displacement Motion Stage

NASA Astrophysics Data System (ADS)

Lin, Jieqiong; Zhao, Dongpo; Lu, Mingming; Zhou, Jiakang

2017-12-01

Micro-displacement motion stage driven by piezoelectric actuator has a significant demand in the field of ultra-precision machining in recent years, while the design of micro-displacement motion stage plays an important role to realize a large displacement output and high precision control. Thus, a 3D elliptical micro-displacement motion stage driven by three PZT actuators has been developed. Firstly, the 3D elliptical trajectory of this motion stage could be adjusted through the form of the PZT actuators input signal. Then, the desired trajectory was obtained by adjusting the micro displacement of the motion stage in 3D elliptical space. Finally, the trajectory simulation and the finite element simulation were applied in this motion stage. The experimental results shown that, the output displacement of the three directions under the input force of the 1600N were 14μm, 16μm and 74μm, respectively. And the first three modes were 1471.6Hz, 2698.4Hz and 2803.4Hz, respectively. Analysis and experiments were carried out to verify the performance, result proved that a large output displacement and high precision control could be obtained.

Sputtered highly oriented PZT thin films for MEMS applications

NASA Astrophysics Data System (ADS)

Kalpat, Sriram S.

Recently there has been an explosion of interest in the field of micro-electro-mechanical systems (MEMS). MEMS device technology has become critical in the growth of various fields like medical, automotive, chemical, and space technology. Among the many applications of ferroelectric thin films in MEMS devices, microfluidics is a field that has drawn considerable amount of research from bio-technology industries as well as chemical and semiconductor manufacturing industries. PZT thin films have been identified as best suited materials for micro-actuators and micro-sensors used in MEMS devices. A promising application for piezoelectric thin film based MEMS devices is disposable drug delivery systems that are capable of sensing biological parameters, mixing and delivering minute and precise amounts of drugs using micro-pumps or micro mixers. These devices call for low driving voltages, so that they can be battery operated. Improving the performance of the actuator material is critical in achieving battery operated disposal drug delivery systems. The device geometry and power consumption in MEMS devices largely depends upon the piezoelectric constant of the films, since they are most commonly used to convert electrical energy into a mechanical response of a membrane or cantilever and vice versa. Phenomenological calculation on the crystal orientation dependence of piezoelectric coefficients for PZT single crystal have reported a significant enhancement of the piezoelectric d33 constant by more than 3 times along [001] in the rhombohedral phase as compared to the conventionally used orientation PZT(111) since [111] is the along the spontaneous polarization direction. This could mean considerable improvement in the MEMS device performance and help drive the operating voltages lower. The motivation of this study is to investigate the crystal orientation dependence of both dielectric and piezoelectric coefficients of PZT thin films in order to select the appropriate orientation that could improve the MEMS device performance. Potential application of these devices is as battery operated disposable drug delivery systems. This work will also investigate the fabrication of a flexural plate wave based microfluidic device using the PZT thin film of appropriate orientation that would enhance the device performance. (Abstract shortened by UMI.)

Direct Intracochlear Acoustic Stimulation Using a PZT Microactuator.

PubMed

Luo, Chuan; Omelchenko, Irina; Manson, Robert; Robbins, Carol; Oesterle, Elizabeth C; Cao, Guo Zhong; Shen, I Y; Hume, Clifford R

2015-12-01

Combined electric and acoustic stimulation has proven to be an effective strategy to improve hearing in some cochlear implant users. We describe an acoustic microactuator to directly deliver stimuli to the perilymph in the scala tympani. The 800 µm by 800 µm actuator has a silicon diaphragm driven by a piezoelectric thin film (e.g., lead-zirconium-titanium oxide or PZT). This device could also be used as a component of a bimodal acoustic-electric electrode array. In the current study, we established a guinea pig model to test the actuator for its ability to deliver auditory signals to the cochlea in vivo. The actuator was placed through the round window of the cochlea. Auditory brainstem response (ABR) thresholds, peak latencies, and amplitude growth were calculated for an ear canal speaker versus the intracochlear actuator for tone burst stimuli at 4, 8, 16, and 24 kHz. An ABR was obtained after removal of the probe to assess loss of hearing related to the procedure. In some animals, the temporal bone was harvested for histologic analysis of cochlear damage. We show that the device is capable of stimulating ABRs in vivo with latencies and growth functions comparable to stimulation in the ear canal. Further experiments will be necessary to evaluate the efficiency and safety of this modality in long-term auditory stimulation and its ability to be integrated with conventional cochlear implant arrays. © The Author(s) 2015.

Pre-stressed piezoelectric bimorph micro-actuators based on machined 40 µm PZT thick films: batch scale fabrication and integration with MEMS

NASA Astrophysics Data System (ADS)

Wilson, S. A.; Jourdain, R. P.; Owens, S.

2010-09-01

The projected force-displacement capability of piezoelectric ceramic films in the 20-50 µm thickness range suggests that they are well suited to many micro-fluidic and micro-pneumatic applications. Furthermore when they are configured as bending actuators and operated at ~ 1 V µm - 1 they do not necessarily conform to the high-voltage, very low-displacement piezoelectric stereotype. Even so they are rarely found today in commercial micro-electromechanical devices, such as micro-pumps and micro-valves, and the main barriers to making them much more widely available would appear to be processing incompatibilities rather than commercial desirability. In particular, the issues associated with integration of these devices into MEMS at the production level are highly significant and they have perhaps received less attention in the mainstream than they deserve. This paper describes a fabrication route based on ultra-precision ceramic machining and full-wafer bonding for cost-effective batch scale production of thick film PZT bimorph micro-actuators and their integration with MEMS. The resulting actuators are pre-stressed (ceramic in compression) which gives them added performance, they are true bimorphs with bi-directional capability and they exhibit full bulk piezoelectric ceramic properties. The devices are designed to integrate with ancillary systems components using transfer-bonding techniques. The work forms part of the European Framework 6 Project 'Q2M—Quality to Micro'.

Health monitoring of reinforced concrete structures based on PZT admittance signal

NASA Astrophysics Data System (ADS)

Wang, Dansheng; Zhu, Hongping; Shen, Danyan; Ge, Dongdong

2009-07-01

Reinforced concrete (RC) structure is one of most familiar engineering structure styles in the civil engineering community, which often suffer crack damage during their service life because of some factors such as overloading, excessive use, and bad environmental conditions. Thus early detection of crack damage is of special concern for RC structures. Piezoelectric materials have direct and converse piezoelectric effects and can serve as actuators or sensors. A health monitoring method based on PZT admittance signals is addressed in this paper, which use the electromechanical coupling property of piezoelectric materials. An experimental study on health monitoring of a RC beam is implemented based on the PZT admittance signals. In this experiment, the electrical admittances of distributed PZT sheets are measured when the host beams are suffering from variable loads. From the obtained PZT admittance curves one can find that the presence of incipient crack can be captured and the cracking load of the RC beam can also generally determined. By the experimental study it is concluded that the health monitoring technique is quite effective and sensitive for RC structures, which indicates its favorable application foreground in civil engineering field.

A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement.

PubMed

Choi, Jongsoo; Qiu, Zhen; Rhee, Choong-Ho; Wang, Thomas; Oldham, Kenn

2014-07-01

A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate (PZT) is described with its detailed structural model. Its central rectangular-shaped mirror platform, also referred to as the stage, is actuated by four symmetric PZT bending legs such that each leg provides vertical translation for one corner of the stage. It has been developed to support real-time in vivo vertical cross-sectional imaging with a dual axes confocal endomicroscope for early cancer detection, having large displacements in three axes (z, θ x , θ y ) and a relatively high bandwidth in the z-axis direction. Prototype microactuators closely meet the performance requirements for this application; in the out-of-plane (z-axis) direction, it has shown more than 177 μ m of displacement and about 84 Hz of structural natural frequency, when two diagonal legs are actuated at 14V. With all four legs, another prototype of the same design with lighter stage mass has achieved more than 430 μ m of out-of-plane displacement at 15V and about 200 Hz of bandwidth. The former design has shown approximately 6.4° and 2.9° of stage tilting about the x-axis and y-axis, respectively, at 14V. This paper also presents a modeling technique that uses experimental data to account for the effects of fabrication uncertainties in residual stress and structural dimensions. The presented model predicts the static motion of the stage within an average absolute error of 14.6 μ m, which approaches the desired imaging resolution, 5 μ m, and also reasonably anticipates the structural dynamic behavior of the stage. The refined model will support development of a future trajectory tracking controller for the system.

A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement

PubMed Central

Choi, Jongsoo; Qiu, Zhen; Rhee, Choong-Ho; Wang, Thomas; Oldham, Kenn

2014-01-01

A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate (PZT) is described with its detailed structural model. Its central rectangular-shaped mirror platform, also referred to as the stage, is actuated by four symmetric PZT bending legs such that each leg provides vertical translation for one corner of the stage. It has been developed to support real-time in vivo vertical cross-sectional imaging with a dual axes confocal endomicroscope for early cancer detection, having large displacements in three axes (z, θx, θy) and a relatively high bandwidth in the z-axis direction. Prototype microactuators closely meet the performance requirements for this application; in the out-of-plane (z-axis) direction, it has shown more than 177 μm of displacement and about 84 Hz of structural natural frequency, when two diagonal legs are actuated at 14V. With all four legs, another prototype of the same design with lighter stage mass has achieved more than 430 μm of out-of-plane displacement at 15V and about 200 Hz of bandwidth. The former design has shown approximately 6.4° and 2.9° of stage tilting about the x-axis and y-axis, respectively, at 14V. This paper also presents a modeling technique that uses experimental data to account for the effects of fabrication uncertainties in residual stress and structural dimensions. The presented model predicts the static motion of the stage within an average absolute error of 14.6 μm, which approaches the desired imaging resolution, 5 μm, and also reasonably anticipates the structural dynamic behavior of the stage. The refined model will support development of a future trajectory tracking controller for the system. PMID:25506131

Production of continuous piezoelectric ceramic fibers for smart materials and active control devices

NASA Astrophysics Data System (ADS)

French, Jonathan D.; Weitz, Gregory E.; Luke, John E.; Cass, Richard B.; Jadidian, Bahram; Bhargava, Parag; Safari, Ahmad

1997-05-01

Advanced Cerametrics Inc. has conceived of and developed the Viscous-Suspension-Spinning Process (VSSP) to produce continuous fine filaments of nearly any powdered ceramic materials. VSSP lead zirconate titanate (PZT) fiber tows with 100 and 790 filaments have been spun in continuous lengths exceeding 1700 meters. Sintered PZT filaments typically are 10 - 25 microns in diameter and have moderate flexibility. Prior to carrier burnout and sintering, VSSP PZT fibers can be formed into 2D and 3D shapes using conventional textile and composite forming processes. While the extension of PZT is on the order of 20 microns per linear inch, a woven, wound or braided structure can contain very long lengths of PZT fiber and generate comparatively large output strokes from relatively small volumes. These structures are intended for applications such as bipolar actuators for fiber optic assembly and repair, vibration and noise damping for aircraft, rotorcraft, automobiles and home applications, vibration generators and ultrasonic transducers for medical and industrial imaging. Fiber and component cost savings over current technologies, such as the `dice-and-fill' method for transducer production, and the range of unique structures possible with continuous VSSP PZT fiber are discussed. Recent results have yielded 1-3 type composites (25 vol% PZT) with d33 equals 340 pC/N, K equals 470, and g33 equals 80 mV/N, kt equals 0.54, kp equals 0.19, dh equals 50.1pC/N and gh equals 13 mV/N.

Modeling Piezoelectric Stack Actuators for Control of Micromanipulation

NASA Technical Reports Server (NTRS)

Goldfarb, Michael; Celanovic, Nikola

1997-01-01

A nonlinear lumped-parameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and, in particular, for microrobotic applications requiring accurate position and/or force control. In formulating this model, the authors propose a generalized Maxwell resistive capacitor as a lumped-parameter causal representation of rate-independent hysteresis. Model formulation is validated by comparing results of numerical simulations to experimental data. Validation is followed by a discussion of model implications for purposes of actuator control.

Detection of crack in thin cylindrical pipes using piezo-actuated Lamb waves

NASA Astrophysics Data System (ADS)

Tua, P. S.; Quek, S. T.; Wang, Q.

2005-05-01

The detection of cracks in beams and plates using piezo-actuated Lamb waves has been presented in the last SPIE Symposium. This paper is an extension of the technique to pipes. It has been shown that for a thin-walled pipe, the assumption of Lamb wave propagation is valid. Such waves can be efficiently excited using piezoceramic transducers (PZT) with good control on the pulse characteristics to assess the health of structural components, such as the presence of cracks. In this paper, a systematic methodology to detect and locate cracks in homogenous cylinder/pipe based on the time-of-flight and strength analysis of propagating Lamb wave is proposed. By observing the attenuation in strength of the direct wave incidence at the sensor, the presence of a crack along the propagation path can be determined. At least four actuation positions, two on each end of the pipe segment of interest, are needed to exhaustively interrogate for the presence of cracks. The detailed procedure for locating and tracing the geometry of the crack(s) is described. It is shown experimentally that the detection using circular PZT actuator and sensor, with dimensions of 5.0 mm diameter and 0.5 mm thick, is possible for an aluminum pipe segment of up to at least 4.0 m in length. The proposed methodology is also explored for the aluminum pipe under more practical situations, such as burying it in sand with only the actuator and sensor positions exposed. Experimental results obtained showed the feasibility of detecting the 'concealed' crack on the pipe buried in sand.

Wireless actuation of piezoelectric coupled micromembrane using radio frequency magnetic field for biomedical applications

NASA Astrophysics Data System (ADS)

Sinha, Dhiraj

2017-04-01

We report on a novel technique of wireless actuation of a micromembrane mounted on a piezoelectric stack using radio frequency magnetic fields. The magnetic field component of the radio frequency field induces time varying voltage across the leads of the piezoelectric stack which results in vibrations of the piezoelectric stack which are eventually transferred to a micromembrane of silicon nitride mounted on top of it. Thus, wireless actuation of micromembranes is achieved which is measured using a laser-photodetector system. Wireless actuation of micromembranes has applications in controlled drug delivery with rates of the order of tens of nanolitres per second. It can also be used in controlling capsule endoscopes, in vivo sensors, and micromachines for biomedical applications.

Electrical Properties and Power Considerations of a Piezoelectric Actuator

NASA Technical Reports Server (NTRS)

Jordan, T.; Ounaies, Z.; Tripp, J.; Tcheng, P.

1999-01-01

This paper assesses the electrical characteristics of piezoelectric wafers for use in aeronautical applications such as active noise control in aircraft. Determination of capacitive behavior and power consumption is necessary to optimize the system configuration and to design efficient driving electronics. Empirical relations are developed from experimental data to predict the capacitance and loss tangent of a PZT5A ceramic as nonlinear functions of both applied peak voltage and driving frequency. Power consumed by the PZT is the rate of energy required to excite the piezoelectric system along with power dissipated due to dielectric loss and mechanical and structural damping. Overall power consumption is thus quantified as a function of peak applied voltage and driving frequency. It was demonstrated that by incorporating the variation of capacitance and power loss with voltage and frequency, satisfactory estimates of power requirements can be obtained. These relations allow general guidelines in selection and application of piezoelectric actuators and driving electronics for active control applications.

A multilayered-cylindrical piezoelectric shear actuator operating in shear (d15) mode

NASA Astrophysics Data System (ADS)

Gao, Xiangyu; Xin, Xudong; Wu, Jingen; Chu, Zhaoqiang; Dong, Shuxiang

2018-04-01

In this work, a multilayered-cylindrical piezoelectric shear actuator (MCPSA) operating in the d15 shear mode was presented for precision actuation under a large mechanical load. The actuator was made of Pb(Zr,Ti)O3 (PZT-51) piezoelectric ceramic rings, which were concentrically assembled together in electrically parallel connection with alternately positive and negative polarizations along the axial direction. Experimental results show that the acquired displacement amplitude at the center of the actuator along the axial direction is around 6.5 μm under the 1 Hz applied voltage of 400 Vpp/mm, and it stayed stably under a mechanical load up to 18 N, which is 7 times larger than that of the previously reported d15 shear actuator. The proposed actuator also shows good displacement linearity with a high resolution of 0.1 μm in responding to a step voltage, indicating its great potential for precision actuation under a large mechanical load.

Enhanced voltage-controlled magnetic anisotropy in magnetic tunnel junctions with an MgO/PZT/MgO tunnel barrier

NASA Astrophysics Data System (ADS)

Chien, Diana; Li, Xiang; Wong, Kin; Zurbuchen, Mark A.; Robbennolt, Shauna; Yu, Guoqiang; Tolbert, Sarah; Kioussis, Nicholas; Khalili Amiri, Pedram; Wang, Kang L.; Chang, Jane P.

2016-03-01

Compared with current-controlled magnetization switching in a perpendicular magnetic tunnel junction (MTJ), electric field- or voltage-induced magnetization switching reduces the writing energy of the memory cell, which also results in increased memory density. In this work, an ultra-thin PZT film with high dielectric constant was integrated into the tunneling oxide layer to enhance the voltage-controlled magnetic anisotropy (VCMA) effect. The growth of MTJ stacks with an MgO/PZT/MgO tunnel barrier was performed using a combination of sputtering and atomic layer deposition techniques. The fabricated MTJs with the MgO/PZT/MgO barrier demonstrate a VCMA coefficient, which is ˜40% higher (19.8 ± 1.3 fJ/V m) than the control sample MTJs with an MgO barrier (14.3 ± 2.7 fJ/V m). The MTJs with the MgO/PZT/MgO barrier also possess a sizeable tunneling magnetoresistance (TMR) of more than 50% at room temperature, comparable to the control MTJs with an MgO barrier. The TMR and enhanced VCMA effect demonstrated simultaneously in this work make the MgO/PZT/MgO barrier-based MTJs potential candidates for future voltage-controlled, ultralow-power, and high-density magnetic random access memory devices.

A novel method of fabricating laminated silicone stack actuators with pre-strained dielectric layers

NASA Astrophysics Data System (ADS)

Hinitt, Andrew D.; Conn, Andrew T.

2014-03-01

In recent studies, stack based Dielectric Elastomer Actuators (DEAs) have been successfully used in haptic feedback and sensing applications. However, limitations in the fabrication method, and materials used to con- struct stack actuators constrain their force and displacement output per unit volume. This paper focuses on a fabrication process enabling a stacked elastomer actuator to withstand the high tensile forces needed for high power applications, such as mimetics for mammalian muscle contraction (i.e prostheses), whilst requiring low voltage for thickness-mode contractile actuation. Spun elastomer layers are bonded together in a pre-strained state using a conductive adhesive filler, forming a Laminated Inter-Penetrating Network (L-IPN) with repeatable and uniform electrode thickness. The resulting structure utilises the stored strain energy of the dielectric elas- tomer to compress the cured electrode composite material. The method is used to fabricate an L-IPN example, which demonstrated that the bonded L-IPN has high tensile strength normal to the lamination. Additionally, the uniformity and retained dielectric layer pre-strain of the L-IPN are confirmed. The described method is envisaged to be used in a semi-automated assembly of large-scale multi-layer stacks of pre-strained dielectric layers possessing a tensile strength in the range generated by mammalian muscle.

Ferroelectricity-induced resistive switching in Pb(Zr0.52Ti0.48)O3/Pr0.7Ca0.3MnO3/Nb-doped SrTiO3 epitaxial heterostructure

NASA Astrophysics Data System (ADS)

Md. Sadaf, Sharif; Mostafa Bourim, El; Liu, Xinjun; Hasan Choudhury, Sakeb; Kim, Dong-Wook; Hwang, Hyunsang

2012-03-01

We investigated the effect of a ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin film on the generation of resistive switching in a stacked Pr0.7Ca0.3MnO3 (PCMO)/Nb-doped SrTiO3 (Nb:STO) heterostructure forming a p-n junction. To promote the ferroelectric effect, the thin PZT active layer was deposited on an epitaxially grown p-type PCMO film on a lattice-matched n-type Nb:STO single crystal. It was concluded that the observed resistive switching behavior in the all-perovskite Pt/PZT/PCMO/Nb:STO heterostructure was related to the modulation of PCMO/Nb:STO p-n junction's depletion width, which was caused either by the PZT ferroelectric polarization field effect, the electrochemical drift of oxygen ions under an electric field, or both simultaneously.

Monitoring of Failure Mechanisms in a Composite Bending Actuator during Cyclic Loading by Acoustic Emission

NASA Astrophysics Data System (ADS)

Woo, Sung-Choong; Goo, Nam Seo

The objective of this work is to investigate the influence of electromechanical cyclic loading on the performance of a bending piezoelectric composite actuator. We have analyzed the fatigue damage mechanisms in terms of the behavior of the AE event rate. It was found that whether the actuators are subjected to purely electric loading or electromechanical loading, the initial fatigue damage of the bending piezoelectric composite actuator was caused by the transgranular fracture in the PZT ceramic layer; the final failure was caused only in the case of PCAWB under electromechanical loading by a local discharge, which critically affected the performance reduction of the actuators. As the number of cycles increased, a large reduction in displacement performance coincided with a high AE event rate, which was identified via microscopic observations.

Piezoelectric Actuator/Sensor Technology at Rockwell

NASA Technical Reports Server (NTRS)

Neurgaonkar, Ratnakar R.

1996-01-01

We describe the state-of-the art of piezoelectric materials based on perovskite and tungsten bronze families for sensor, actuator and smart structure applications. The microstructural defects in these materials have been eliminated to a large extent and the resulting materials exhibit exceedingly high performance for various applications. The performance of Rockwell actuators/sensors is at least 3 times better than commercially available products. These high performance actuators are being incorporated into various applications including, DOD, NASA and commercial. The multilayer actuator stacks fabricated from our piezoceramics are advantageous for sensing and high capacitance applications. In this presentation, we will describe the use of our high performance piezo-ceramics for actuators and sensors, including multilayer stacks and composite structures.

Feasibility of Using PZT Actuators to Study the Dynamic Behavior of a Rotating Disk due to Rotor-Stator Interaction

PubMed Central

Presas, Alexandre; Egusquiza, Eduard; Valero, Carme; Valentin, David; Seidel, Ulrich

2014-01-01

In this paper, PZT actuators are used to study the dynamic behavior of a rotating disk structure due to rotor-stator interaction excitation. The disk is studied with two different surrounding fluids—air and water. The study has been performed analytically and validated experimentally. For the theoretical analysis, the natural frequencies and the associated mode shapes of the rotating disk in air and water are obtained with the Kirchhoff-Love thin plate theory coupled with the interaction with the surrounding fluid. A model for the Rotor Stator Interaction that occurs in many rotating disk-like parts of turbomachinery such as compressors, hydraulic runners or alternators is presented. The dynamic behavior of the rotating disk due to this excitation is deduced. For the experimental analysis a test rig has been developed. It consists of a stainless steel disk (r = 198 mm and h = 8 mm) connected to a variable speed motor. Excitation and response are measured from the rotating system. For the rotating excitation four piezoelectric patches have been used. Calibrating the piezoelectric patches in amplitude and phase, different rotating excitation patterns are applied on the rotating disk in air and in water. Results show the feasibility of using PZT to control the response of the disk due to a rotor-stator interaction. PMID:25004151

Influence of PZT Coating Thickness and Electrical Pole Alignment on Microresonator Properties.

PubMed

Janusas, Giedrius; Ponelyte, Sigita; Brunius, Alfredas; Guobiene, Asta; Vilkauskas, Andrius; Palevicius, Arvydas

2016-11-10

With increasing technical requirements in the design of microresonators, the development of new techniques for lightweight, simple, and inexpensive components becomes relevant. Lead zirconate titanate (PZT) is a powerful tool in the formation of these components, allowing a self-actuation or self-sensing capability. Different fabrication methods lead to the variation of the properties of the device itself. This research paper covers the fabrication of a novel PZT film and the investigations of its chemical, surface, and dynamic properties when film thickness is varied. A screen-printing technique was used for the formation of smooth films of 60 µm, 68 µm, and 25 µm thickness. A custom-made poling technique was applied to enhance the piezoelectric properties of the designed films. However, poling did not change any compositional or surface characteristics of the films; changes were only seen in the electrical ones. The results showed that a thinner poled PZT film having a chemical composition with the highest amount of copper and zirconium led to better electrical characteristics (generated voltage of 3.5 mV).

Dynamic modeling and hierarchical compound control of a novel 2-DOF flexible parallel manipulator with multiple actuation modes

NASA Astrophysics Data System (ADS)

Liang, Dong; Song, Yimin; Sun, Tao; Jin, Xueying

2018-03-01

This paper addresses the problem of rigid-flexible coupling dynamic modeling and active control of a novel flexible parallel manipulator (PM) with multiple actuation modes. Firstly, based on the flexible multi-body dynamics theory, the rigid-flexible coupling dynamic model (RFDM) of system is developed by virtue of the augmented Lagrangian multipliers approach. For completeness, the mathematical models of permanent magnet synchronous motor (PMSM) and piezoelectric transducer (PZT) are further established and integrated with the RFDM of mechanical system to formulate the electromechanical coupling dynamic model (ECDM). To achieve the trajectory tracking and vibration suppression, a hierarchical compound control strategy is presented. Within this control strategy, the proportional-differential (PD) feedback controller is employed to realize the trajectory tracking of end-effector, while the strain and strain rate feedback (SSRF) controller is developed to restrain the vibration of the flexible links using PZT. Furthermore, the stability of the control algorithm is demonstrated based on the Lyapunov stability theory. Finally, two simulation case studies are performed to illustrate the effectiveness of the proposed approach. The results indicate that, under the redundant actuation mode, the hierarchical compound control strategy can guarantee the flexible PM achieves singularity-free motion and vibration attenuation within task workspace simultaneously. The systematic methodology proposed in this study can be conveniently extended for the dynamic modeling and efficient controller design of other flexible PMs, especially the emerging ones with multiple actuation modes.

Direct Intracochlear Acoustic Stimulation Using a PZT Microactuator

PubMed Central

Luo, Chuan; Omelchenko, Irina; Manson, Robert; Robbins, Carol; Oesterle, Elizabeth C.; Cao, Guo Zhong; Hume, Clifford R.

2015-01-01

Combined electric and acoustic stimulation has proven to be an effective strategy to improve hearing in some cochlear implant users. We describe an acoustic microactuator to directly deliver stimuli to the perilymph in the scala tympani. The 800 µm by 800 µm actuator has a silicon diaphragm driven by a piezoelectric thin film (e.g., lead-zirconium-titanium oxide or PZT). This device could also be used as a component of a bimodal acoustic-electric electrode array. In the current study, we established a guinea pig model to test the actuator for its ability to deliver auditory signals to the cochlea in vivo. The actuator was placed through the round window of the cochlea. Auditory brainstem response (ABR) thresholds, peak latencies, and amplitude growth were calculated for an ear canal speaker versus the intracochlear actuator for tone burst stimuli at 4, 8, 16, and 24 kHz. An ABR was obtained after removal of the probe to assess loss of hearing related to the procedure. In some animals, the temporal bone was harvested for histologic analysis of cochlear damage. We show that the device is capable of stimulating ABRs in vivo with latencies and growth functions comparable to stimulation in the ear canal. Further experiments will be necessary to evaluate the efficiency and safety of this modality in long-term auditory stimulation and its ability to be integrated with conventional cochlear implant arrays. PMID:26631107

Enhancement of Optical Adaptive Sensing by Using a Dual-Stage Seesaw-Swivel Actuator with a Tunable Vibration Absorber

PubMed Central

Chou, Po-Chien; Lin, Yu-Cheng; Cheng, Stone

2011-01-01

Technological obstacles to the use of rotary-type swing arm actuators to actuate optical pickup modules in small-form-factor (SFF) disk drives stem from a hinge’s skewed actuation, subsequently inducing off-axis aberrations and deteriorating optical quality. This work describes a dual-stage seesaw-swivel actuator for optical pickup actuation. A triple-layered bimorph bender made of piezoelectric materials (PZTs) is connected to the suspension of the pickup head, while the tunable vibration absorber (TVA) unit is mounted on the seesaw swing arm to offer a balanced force to reduce vibrations in a focusing direction. Both PZT and TVA are designed to satisfy stable focusing operation operational requirements and compensate for the tilt angle or deformation of a disc. Finally, simulation results verify the performance of the dual-stage seesaw-swivel actuator, along with experimental procedures and parametric design optimization confirming the effectiveness of the proposed system. PMID:22163877

The Load Capability of Piezoelectric Single Crystal Actuators

NASA Technical Reports Server (NTRS)

Xu, Tian-Bing; Su, Ji; Jiang, Xiaoning; Rehrig, Paul W.; Hackenberger, Wesley S.

2006-01-01

Piezoelectric lead magnesium niobate-lead titanate (PMN-PT) single crystal is one of the most promising materials for electromechanical device applications due to its high electrical field induced strain and high electromechanical coupling factor. PMN-PT single crystal-based multilayer stack actuators and multilayer stack-based flextensional actuators have exhibited high stroke and high displacement-voltage ratios. The actuation capabilities of these two actuators were evaluated using a newly developed method based upon a laser vibrometer system under various loading conditions. The measured displacements as a function of mechanical loads at different driving voltages indicate that the displacement response of the actuators is approximately constant under broad ranges of mechanical load. The load capabilities of these PMN-PT single crystal-based actuators and the advantages of the capability for applications will be discussed.

The Load Capability of Piezoelectric Single Crystal Actuators

NASA Technical Reports Server (NTRS)

Xu, Tian-Bing; Su, Ji; Jiang, Xiaoning; Rehrig, Paul W.; Hackenberger, Wesley S.

2007-01-01

Piezoelectric lead magnesium niobate-lead titanate (PMN-PT) single crystal is one of the most promising materials for electromechanical device applications due to its high electrical field induced strain and high electromechanical coupling factor. PMN-PT single crystal-based multilayer stack actuators and multilayer stack-based flextensional actuators have exhibited high stroke and high displacement-voltage ratios. The actuation capabilities of these two actuators were evaluated using a newly developed method based upon a laser vibrometer system under various loading conditions. The measured displacements as a function of mechanical loads at different driving voltages indicate that the displacement response of the actuators is approximately constant under broad ranges of mechanical load. The load capabilities of these PMN-PT single crystal-based actuators and the advantages of the capability for applications will be discussed.

A study on the effect of surface topography on the actuation performance of stacked-rolled dielectric electro active polymer actuator

NASA Astrophysics Data System (ADS)

Sait, Usha; Muthuswamy, Sreekumar

2016-05-01

Dielectric electro active polymer (DEAP) is a suitable actuator material that finds wide applications in the field of robotics and medical areas. This material is highly controllable, flexible, and capable of developing large strain. The influence of geometrical behavior becomes critical when the material is used as miniaturized actuation devices in robotic applications. The present work focuses on the effect of surface topography on the performance of flat (single sheet) and stacked-rolled DEAP actuators. The non-active areas in the form of elliptical spots that affect the performance of the actuator are identified using scanning electron microscope (SEM) and energy dissipated X-ray (EDX) experiments. Performance of DEAP actuation is critically evaluated, compared, and presented with analytical and experimental results.

Enhanced Piezoelectric Response in HybridPerovskite via Interfacing with Ferroelectric Pb(Zr,Ti)O3

NASA Astrophysics Data System (ADS)

Song, Jingfeng; Xiao, Zhiyong; Chen, Bo; Prockish, Spencer; Chen, Xuegang; Wang, Dong; Huang, Jinsong; Hong, Xia

In this work, we have carried out a comprehensive study of the piezoelectric properties of polycrystalline hybrid perovskite CH3NH3PbI3 (MAPbI3) thin films on two types of substrates. We spin coated 20-100 nm MAPbI3 thin films on gold and ferroelectric Pb(Zr,Ti)O3 (PZT), and characterized their piezoelectric coefficient d33 using piezoresponse force microscopy (PFM). The MAPbI3 thin films on gold showed a d33 of 0.4 pm/V. The epitaxial PZT films ( 50 nm) were deposited on (La,Sr)MnO3/SrTiO3 substrates, with polarization uniformly oriented in the up direction. For MAPbI3 films on PZT, there are regions showing clear PFM phase response, suggesting that MAPbI3 is polar with out-of-plane polarization. The PFM amplitude image of MAPbI3 indicated the existence of both constructive and destructive piezoresponse with that of PZT. The extracted d33is4 pm/V, 10-fold higher than that on gold. The enhanced piezoresponse is attributed to the dipole-dipole interaction between MAPbI3 and PZT. Our study points to an effective route to engineer the piezoelectric properties MAPbI3 for applications such as mechanical actuators and energy harvesting.

MECHANICAL STRENGTH RESPONSES OF POLED LEAD ZIRCONATE TITANATE UNDER EXTREME ELECTRIC FIELD AND VARIOUS TEMPERATURE CONDITIONS

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Hong; Matsunaga, Tadashi; Zhang, Kewei

PZT (lead zirconate titanate), particularly PZT-5A, is used in a variety of critical actuation and sensing systems because of its high Curie temperature and large piezoelectric coefficients. However, PZT is susceptible to mechanical failure. The evaluation of the mechanical strength of the material under the target working conditions is very important. This study presents part of the recent experimental developments in mechanical testing and evaluation of PZT materials at Oak Ridge National Laboratory. Ball-on-ring and four-point bending testing setups were used, with modifications made to account for testing requirements from high-level electric field and elevated temperature. The poled PZT-5A ormore » equivalent material was tested under various specimen and testing conditions. The parameters of the distribution of strengths (characteristic strength and Weibull modulus) are discussed in relation to the testing conditions. Fractographic results based on scanning electron microscopy are also presented and discussed. The related data can serve as input for the design of piezoceramic devices, not only those used in energy systems like fuel injectors in heavy-duty diesel engines, but also those used in structural health monitoring, energy harvesting, and other critical systems in aerospace and civil engineering.« less

Full Piezoelectric Multilayer-Stacked Hybrid Actuation/Transduction Systems

NASA Technical Reports Server (NTRS)

Su, Ji; Jiang, Xiaoning; Zu, Tian-Bing

2011-01-01

The Stacked HYBATS (Hybrid Actuation/Transduction system) demonstrates significantly enhanced electromechanical performance by using the cooperative contributions of the electromechanical responses of multilayer, stacked negative strain components and positive strain components. Both experimental and theoretical studies indicate that, for Stacked HYBATS, the displacement is over three times that of a same-sized conventional flextensional actuator/transducer. The coupled resonance mode between positive strain and negative strain components of Stacked HYBATS is much stronger than the resonance of a single element actuation only when the effective lengths of the two kinds of elements match each other. Compared with the previously invented hybrid actuation system (HYBAS), the multilayer Stacked HYBATS can be designed to provide high mechanical load capability, low voltage driving, and a highly effective piezoelectric constant. The negative strain component will contract, and the positive strain component will expand in the length directions when an electric field is applied on the device. The interaction between the two elements makes an enhanced motion along the Z direction for Stacked-HYBATS. In order to dominate the dynamic length of Stacked-HYBATS by the negative strain component, the area of the cross-section for the negative strain component will be much larger than the total cross-section areas of the two positive strain components. The transverse strain is negative and longitudinal strain positive in inorganic materials, such as ceramics/single crystals. Different piezoelectric multilayer stack configurations can make a piezoelectric ceramic/single-crystal multilayer stack exhibit negative strain or positive strain at a certain direction without increasing the applied voltage. The difference of this innovation from the HYBAS is that all the elements can be made from one-of-a-kind materials. Stacked HYBATS can provide an extremely effective piezoelectric constant at both resonance and off resonance frequencies. The effective piezoelectric constant can be alternated by varying the size of each component, the degree of the pre-curvature of the positive strain components, the thickness of each layer in the multilayer stacks, and the piezoelectric constant of the material used. Because all of the elements are piezoelectric components, Stacked HYBATS can serve as projector and receiver for underwater detection. The performance of this innovation can be enhanced by improving the piezoelectric properties.

Active vibration damping using smart material

NASA Technical Reports Server (NTRS)

Baras, John S.; Yan, Zhuang

1994-01-01

We consider the modeling and active damping of an elastic beam using distributed actuators and sensors. The piezoelectric ceramic material (PZT) is used to build the actuator. The sensor is made of the piezoelectric polymer polyvinylidene fluoride (PVDF). These materials are glued on both sides of the beam. For the simple clamped beam, the closed loop controller has been shown to be able to extract energy from the beam. The shape of the actuator and its influence on the closed loop system performance are discussed. It is shown that it is possible to suppress the selected mode by choosing the appropriate actuator layout. It is also shown that by properly installing the sensor and determining the sensor shape we can further extract and manipulate the sensor signal for our control need.

Miniature Cryogenic Valves for a Titan Lake Sampling System

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Zimmerman, Wayne; Takano, Nobuyuki; Avellar, Louisa

2014-01-01

The Cassini mission has revealed Titan to be one of the most Earthlike worlds in the Solar System complete with many of the same surface features including lakes, river channels, basins, and dunes. But unlike Earth, the materials and fluids on Titan are composed of cryogenic organic compounds with lakes of liquid methane and ethane. One of the potential mission concepts to explore Titan is to land a floating platform on one of the Titan Lakes and determine the local lake chemistry. In order to accomplish this within the expected mass volume and power budgets there is a need to pursue the development for a low power lightweight cryogenic valves which can be used along with vacuum lines to sample lake liquid and to distribute to various instruments aboard the Lander. To meet this need we have initiated the development of low power cryogenic valves and actuators based on a single crystal piezoelectric flextensional stacks produced by TRS Ceramics Inc. Since the origin of such high electromechanical properties of Relaxor-PT single crystals is due to the polarization rotation effect, (i.e., intrinsic contributions), the strain per volt decrease at cryogenic temperatures is much lower than in standard Lead Zirconate Titanate (PZT) ceramics. This makes them promising candidates for cryogenic actuators with regards to the stroke for a given voltage. This paper will present our Titan Lake Sampling and Sample Handling system design and the development of small cryogenic piezoelectric valves developed to meet the system specifications.

Actuators Using Piezoelectric Stacks and Displacement Enhancers

NASA Technical Reports Server (NTRS)

Bar-Cohen, Yoseph; Sherrit, Stewart; Bao, Xiaoqi; Badescu, Mircea; Lee, Hyeong Jae; Walkenmeyer, Phillip; Lih, Shyh-Shiuh

2015-01-01

Actuators are used to drive all active mechanisms including machines, robots, and manipulators to name a few. The actuators are responsible for moving, manipulating, displacing, pushing and executing any action that is needed by the mechanism. There are many types and principles of actuation that are responsible for these movements ranging from electromagnetic, electroactive, thermo-mechanic, piezoelectric, electrostrictive etc. Actuators are readily available from commercial producers but there is a great need for reducing their size, increasing their efficiency and reducing their weight. Studies at JPL’s Non Destructive Evaluation and Advanced Actuators (NDEAA) Laboratory have been focused on the use of piezoelectric stacks and novel designs taking advantage of piezoelectric’s potential to provide high torque/force density actuation and high electromechanical conversion efficiency. The actuators/motors that have been developed and reviewed in this paper are operated by various horn configurations as well as the use of pre-stress flexures that make them thermally stable and increases their coupling efficiency. The use of monolithic designs that pre-stress the piezoelectric stack eliminates the use of compression stress bolt. These designs enable the embedding of developed solid-state motors/actuators in any structure with the only macroscopically moving parts are the rotor or the linear translator. Finite element modeling and design tools were used to determine the requirements and operation parameters and the results were used to simulate, design and fabricate novel actuators/motors. The developed actuators and performance will be described and discussed in this paper.

Evolution from MEMS-based Linear Drives to Bio-based Nano Drives

NASA Astrophysics Data System (ADS)

Fujita, Hiroyuki

The successful extension of semiconductor technology to fabricate mechanical parts of the sizes from 10 to 100 micrometers opened wide ranges of possibilities for micromechanical devices and systems. The fabrication technique is called micromachining. Micromachining processes are based on silicon integrated circuits (IC) technology and used to build three-dimensional structures and movable parts by the combination of lithography, etching, film deposition, and wafer bonding. Microactuators are the key devices allowing MEMS to perform physical functions. Some of them are driven by electric, magnetic, and fluidic forces. Some others utilize actuator materials including piezoelectric (PZT, ZnO, quartz) and magnetostrictive materials (TbFe), shape memory alloy (TiNi) and bio molecular motors. This paper deals with the development of MEMS based microactuators, especially linear drives, following my own research experience. They include an electrostatic actuator, a superconductive levitated actuator, arrayed actuators, and a bio-motor-driven actuator.

Dominance of debonding defect of CFST on PZT sensor response considering the meso-scale structure of concrete with multi-scale simulation

NASA Astrophysics Data System (ADS)

Xu, Bin; Chen, Hongbing; Mo, Y.-L.; Zhou, Tianmin

2018-07-01

Piezoelectric-lead-zirconate-titanate(PZT)-based interface debonding defects detection for concrete filled steel tubulars (CFSTs) has been proposed and validated through experiments, and numerical study on its mechanism has been carried out recently by assuming that concrete material is homogenous. However, concrete is composed of coarse and fine aggregates, mortar and interface transition zones (ITZs) and even initial defects and is a typical nonhomogeneous material and its mesoscale structure might affect the wave propagation in the concrete core of CFST members. Therefore, it is significantly important to further investigate the influence of mesoscale structure of concrete on the stress wave propagation and the response of embedded PZT sensor for the interface debonding detection. In this study, multi-physical numerical simulation on the wave propagation and embedded PZT sensor response of rectangular CFST members with numerical concrete core considering the randomness in circular aggregate distribution, and coupled with surface-mounted PZT actuator and embedded PZT sensor is carried out. The effect of randomness in the circular aggregates distribution and the existence of ITZs are discussed. Both a local stress wave propagation behavior including transmission, reflection, and diffraction at the interface between concrete core and steel tube under a pulse signal excitation and a global wave field in the cross-section of the rectangular CFST models without and with interface debonding defects under sweep frequency excitation are simulated. The sensitivity of an evaluation index based on wavelet packet analysis on the embedded PZT sensor response on the variation of mesoscale parameters of concrete core without and with different interface debonding defects under sweep frequency voltage signal is investigated in details. The results show that the effect of the interface debondings on the embedded PZT measurement is dominant when compared to the meso-scale structures of concrete core. This study verified the feasibility of the PZT based debonding detection for rectangular CFST members even the meso-scale structure of concrete core is considered.

Fabrication Methods for Adaptive Deformable Mirrors

NASA Technical Reports Server (NTRS)

Toda, Risaku; White, Victor E.; Manohara, Harish; Patterson, Keith D.; Yamamoto, Namiko; Gdoutos, Eleftherios; Steeves, John B.; Daraio, Chiara; Pellegrino, Sergio

2013-01-01

Previously, it was difficult to fabricate deformable mirrors made by piezoelectric actuators. This is because numerous actuators need to be precisely assembled to control the surface shape of the mirror. Two approaches have been developed. Both approaches begin by depositing a stack of piezoelectric films and electrodes over a silicon wafer substrate. In the first approach, the silicon wafer is removed initially by plasmabased reactive ion etching (RIE), and non-plasma dry etching with xenon difluoride (XeF2). In the second approach, the actuator film stack is immersed in a liquid such as deionized water. The adhesion between the actuator film stack and the substrate is relatively weak. Simply by seeping liquid between the film and the substrate, the actuator film stack is gently released from the substrate. The deformable mirror contains multiple piezoelectric membrane layers as well as multiple electrode layers (some are patterned and some are unpatterned). At the piezolectric layer, polyvinylidene fluoride (PVDF), or its co-polymer, poly(vinylidene fluoride trifluoroethylene P(VDF-TrFE) is used. The surface of the mirror is coated with a reflective coating. The actuator film stack is fabricated on silicon, or silicon on insulator (SOI) substrate, by repeatedly spin-coating the PVDF or P(VDFTrFE) solution and patterned metal (electrode) deposition. In the first approach, the actuator film stack is prepared on SOI substrate. Then, the thick silicon (typically 500-micron thick and called handle silicon) of the SOI wafer is etched by a deep reactive ion etching process tool (SF6-based plasma etching). This deep RIE stops at the middle SiO2 layer. The middle SiO2 layer is etched by either HF-based wet etching or dry plasma etch. The thin silicon layer (generally called a device layer) of SOI is removed by XeF2 dry etch. This XeF2 etch is very gentle and extremely selective, so the released mirror membrane is not damaged. It is possible to replace SOI with silicon substrate, but this will require tighter DRIE process control as well as generally longer and less efficient XeF2 etch. In the second approach, the actuator film stack is first constructed on a silicon wafer. It helps to use a polyimide intermediate layer such as Kapton because the adhesion between the polyimide and silicon is generally weak. A mirror mount ring is attached by using adhesive. Then, the assembly is partially submerged in liquid water. The water tends to seep between the actuator film stack and silicon substrate. As a result, the actuator membrane can be gently released from the silicon substrate. The actuator membrane is very flat because it is fixed to the mirror mount prior to the release. Deformable mirrors require extremely good surface optical quality. In the technology described here, the deformable mirror is fabricated on pristine substrates such as prime-grade silicon wafers. The deformable mirror is released by selectively removing the substrate. Therefore, the released deformable mirror surface replicates the optical quality of the underlying pristine substrate.

Fabrication of piezoelectric ceramic micro-actuator and its reliability for hard disk drives.

PubMed

Jing, Yang; Luo, Jianbin; Yang, Wenyan; Ju, Guoxian

2004-11-01

A new U-type micro-actuator for precisely positioning a magnetic head in high-density hard disk drives was proposed and developed. The micro-actuator is composed of a U-type stainless steel substrate and two piezoelectric ceramic elements. Using a high-d31 piezoelectric coefficient PMN-PZT ceramic plate and adopting reactive ion etching process fabricate the piezoelectric elements. Reliability against temperature was investigated to ensure the practical application to the drive products. The U-type substrate attached to each side via piezoelectric elements also was simulated by the finite-element method and practically measured by a laser Doppler vibrometer in order to testify the driving mechanics of it. The micro-actuator coupled with two piezoelectric elements featured large displacement of 0.875 microm and high-resonance frequency over 22 kHz. The novel piezoelectric micro-actuators then possess a useful compromise performance to displacement, resonance frequency, and generative force. The results reveal that the new design concept provides a valuable alternative for multilayer piezoelectric micro-actuators.

An enhanced CCRTM (E-CCRTM) damage imaging technique using a 2D areal scan for composite plates

NASA Astrophysics Data System (ADS)

He, Jiaze; Yuan, Fuh-Gwo

2016-04-01

A two-dimensional (2-D) non-contact areal scan system was developed to image and quantify impact damage in a composite plate using an enhanced zero-lag cross-correlation reverse-time migration (E-CCRTM) technique. The system comprises a single piezoelectric actuator mounted on the composite plate and a laser Doppler vibrometer (LDV) for scanning a region to capture the scattered wavefield in the vicinity of the PZT. The proposed damage imaging technique takes into account the amplitude, phase, geometric spreading, and all of the frequency content of the Lamb waves propagating in the plate; thus, the reflectivity coefficients of the delamination can be calculated and potentially related to damage severity. Comparisons are made in terms of damage imaging quality between 2-D areal scans and linear scans as well as between the proposed and existing imaging conditions. The experimental results show that the 2-D E-CCRTM performs robustly when imaging and quantifying impact damage in large-scale composites using a single PZT actuator with a nearby areal scan using LDV.

Epitaxial growth of metallic buffer layer structure and c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 thin film on Si for high performance piezoelectric micromachined ultrasonic transducer

NASA Astrophysics Data System (ADS)

Thao, Pham Ngoc; Yoshida, Shinya; Tanaka, Shuji

2017-12-01

This paper reports on the development of a metallic buffer layer structure, (100) SrRuO3 (SRO)/(100) Pt/(100) Ir/(100) yttria-stabilized zirconia (YSZ) layers for the epitaxial growth of a c-axis oriented Pb(Mn1/3,Nb2/3)O3-Pb(Zr,Ti)O3 (PMnN-PZT) thin film on a (100) Si wafer for piezoelectric micro-electro mechanical systems (MEMS) application. The stacking layers were epitaxially grown on a Si substrate under the optimal deposition condition. A crack-free PMnN-PZT epitaxial thin films was obtained at a thickness up to at least 1.7 µm, which is enough for MEMS applications. The unimorph MEMS cantilevers based on the PMnN-PZT thin film were fabricated and characterized. As a result, the PMnN-PZT thin film exhibited -10 to -12 C/m2 as a piezoelectric coefficient e 31,f and ˜250 as a dielectric constants ɛr. The resultant FOM for piezoelectric micromachined ultrasonic transducer (pMUT) is higher than those of general PZT and AlN thin films. This structure has a potential to provide high-performance pMUTs.

Application of Multiplexed FBG and PZT Impedance Sensors for Health Monitoring of Rocks.

PubMed

Yang, Yaowen; Annamdas, Venu Gopal Madhav; Wang, Chao; Zhou, Yingxin

2008-01-21

Reliable structural health monitoring (SHM) including nondestructiveevaluation (NDE) is essential for safe operation of infrastructure systems. Effectivemonitoring of the rock components of civil infrastructures such as tunnels and cavernsremains challenging. The feasibility of employing smart optical fibre sensor (OFS) andpiezoelectric impedance sensor made up of lead zirconate titanate (PZT) forcomprehensive health monitoring of rocks, covering load history monitoring/retrieval aswell as damage assessment is presented in this paper. The rock specimens are subjected tocyclic loading and their conditions are continuously monitored using OFS and PZTsensors. OFS based multiplexed fibre Bragg grating (FBG) sensors are surface bonded onthe rock specimens. Their strain sensing performance is compared with the conventionalelectric strain gauges (ESGs). In addition, PZT patches are also bonded on the specimensto study the damage pattern during different loading cycles. Unlike the FBGs or ESGs,PZT patches are used as bi-functional sensors and actuators, enabling them to be efficientdetectors of incipient damages using the principle of electromechanical impedance. Theexperimental study demonstrated superior performance of these smart FBG and PZTimpedance sensors. This work is expected to be useful for SHM based NDE application ofrock structures such as caverns and tunnels.

Controlling Piezoelectric Responses in Pb(Zr0.52Ti0.48)O3 Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

PubMed Central

2017-01-01

Nanosheet Ca2Nb3O10 (CNOns) layers were deposited on ultralow expansion glass substrates by the Langmuir–Blodgett method to obtain preferential (001)-oriented growth of Pb(Zr0.52Ti0.48)O3 (PZT) thin films using pulsed laser deposition (PLD) to enhance the ferroelectric and piezoelectric properties of the films. The PLD deposition temperature and repetition frequency used for the deposition of the PZT films were found to play a key role in the precise control of the microstructure and therefore of the ferroelectric and piezoelectric properties. A film deposited at a high repetition frequency has a columnar grain structure, which helps to increase the longitudinal piezoelectric coefficient (d33f). An enhanced d33f value of 356 pm V–1 was obtained for 2-μm-thick PZT films on CNOns/glass substrates. This high value is ascribed to the preferential alignment of the crystalline [001] axis normal to the substrate surface and the open columnar structure. Large displacement actuators based on such PZT films grown on CNOns/glass substrates should be useful in smart X-ray optics applications. PMID:28952313

Domain pinning near a single-grain boundary in tetragonal and rhombohedral lead zirconate titanate films

DOE PAGES

Marincel, Dan M.; Zhang, H. R.; Briston, J.; ...

2015-04-27

The interaction of grain boundaries with ferroelectric domain walls strongly influences the extrinsic contribution to piezoelectric activity in Pb(Zr,Ti)O 3 (PZT), ubiquitous in modern transducers and actuators. However, the fundamental understanding of these phenomena has been limited by complex mechanisms originating from the interplay of atomic-level domain wall pinning, collective domain wall dynamics, and emergent mesoscopic behavior. This contribution utilizes engineered grain boundaries created by depositing epitaxial PZT films with various Zr:Ti ratio onto 24º SrTiO 3 tilt bicrystals. The nonlinear piezoelectric response and surface domain structure across the boundary are investigated using piezoresponse force microscopy whilst cross section domainmore » structure is studied using transmission electron microscopy. The grain boundary reduces domain wall motion over a width of 800±70 nm for PZT 45:55 and 450±30 nm for PZT 52:48. Phase field modeling provides an understanding of the elastic and electric fields associated with the grain boundary and local domain configurations. In conclusion, this study demonstrates that complex mesoscopic behaviors can be explored to complement atomic-level pictures of the material system.« less

Improving yield of PZT piezoelectric devices on glass substrates

NASA Astrophysics Data System (ADS)

Johnson-Wilke, Raegan L.; Wilke, Rudeger H. T.; Cotroneo, Vincenzo; Davis, William N.; Reid, Paul B.; Schwartz, Daniel A.; Trolier-McKinstry, Susan

2012-10-01

The proposed SMART-X telescope includes adaptive optics systems that use piezoelectric lead zirconate titanate (PZT) films deposited on flexible glass substrates. Several processing constraints are imposed by current designs: the crystallization temperature must be kept below 550 °C, the total stress in the film must be minimized, and the yield on 1 cm2 actuator elements should be < 90%. For this work, RF magnetron sputtering was used to deposit films since chemical solution deposition (CSD) led to warping of large area flexible glass substrates. A PZT 52/48 film that wasdeposited at 4 mTorr and annealed at 550 °C for 24 hours showed no detectable levels of either PbO or pyrochlore second phases. Large area electrodes (1cm x 1 cm) were deposited on 4" glass substrates. Initially, the yield of the devices was low, however, two methods were employed to increase the yield to near 100 %. The first method included a more rigorous cleaning to improve the continuity of the Pt bottom electrode. The second method was to apply 3 V DC across the capacitor structure to burn out regions of defective PZT. The result of this latter method essentially removed conducting filaments in the PZT but left the bulk of the material undamaged. By combining these two methods, the yield on the large area electrodes improved from < 10% to nearly 100%.

Development of blood extraction system designed by female mosquito's blood sampling mechanism for bio-MEMS

NASA Astrophysics Data System (ADS)

Tsuchiya, Kazuyoshi; Nakanishi, Naoyuki; Nakamachi, Eiji

2005-02-01

A compact and wearable wristwatch type Bio-MEMS such as a health monitoring system (HMS) to detect blood sugar level for diabetic patient, was newly developed. The HMS consists of (1) a indentation unit with a microneedle to generate the skin penetration force using a shape memory alloy(SMA) actuator, (2) a pumping unit using a bimorph PZT piezoelectric actuator to extract the blood and (3) a gold (Au) electrode as a biosensor immobilized GOx and attached to the gate electrode of MOSFET to detect the amount of Glucose in extracted blood. GOx was immobilized on a self assembled spacer combined with an Au electrode by the cross-link method using BSA as an additional bonding material. The device can extract blood in a few microliter through a painless microneedle with the negative pressure by deflection of the bimorph PZT piezoelectric actuator produced in the blood chamber, by the similar way the female mosquito extracts human blood with muscle motion to flex or relax. The performances of the liquid sampling ability of the pumping unit through a microneedle (3.8mm length, 100μm internal diameter) using the bimorph PZT piezoelectric microactuator were measured. The blood extraction micro device could extract human blood at the speed of 2μl/min, and it is enough volume to measure a glucose level, compared to the amount of commercial based glucose level monitor. The electrode embedded in the blood extraction device chamber could detect electrons generated by the hydrolysis of hydrogen peroxide produced by the reaction between GOx and glucose in a few microliter extracted blood, using the constant electric current measurement system of the MOSFET type hybrid biosensor. The output voltage for the glucose diluted in the chamber was increased lineally with increase of the glucose concentration.

A large-scan-angle piezoelectric MEMS optical scanner actuated by a Nb-doped PZT thin film

NASA Astrophysics Data System (ADS)

Naono, Takayuki; Fujii, Takamichi; Esashi, Masayoshi; Tanaka, Shuji

2014-01-01

Resonant 1D microelectromechanical systems (MEMS) optical scanners actuated by piezoelectric unimorph actuators with a Nb-doped lead zirconate titanate (PNZT) thin film were developed for endoscopic optical coherence tomography (OCT) application. The MEMS scanners were designed as the resonance frequency was less than 125 Hz to obtain enough pixels per frame in OCT images. The device size was within 3.4 mm × 2.5 mm, which is compact enough to be installed in a side-imaging probe with 4 mm inner diameter. The fabrication process started with a silicon-on-insulator wafer, followed by PNZT deposition by the Rf sputtering and Si bulk micromachining process. The fabricated MEMS scanners showed maximum optical scan angles of 146° at 90 Hz, 148° at 124 Hz, 162° at 180 Hz, and 152° at 394 Hz at resonance in atmospheric pressure. Such wide scan angles were obtained by a drive voltage below 1.3 Vpp, ensuring intrinsic safety in in vivo uses. The scanner with the unpoled PNZT film showed three times as large a scan angle as that with a poled PZT films. A swept-source OCT system was constructed using the fabricated MEMS scanner, and cross-sectional images of a fingertip with image widths of 4.6 and 2.3 mm were acquired. In addition, a PNZT-based angle sensor was studied for feedback operation.

Vibrotactile display for mobile applications based on dielectric elastomer stack actuators

NASA Astrophysics Data System (ADS)

Matysek, Marc; Lotz, Peter; Flittner, Klaus; Schlaak, Helmut F.

2010-04-01

Dielectric elastomer stack actuators (DESA) offer the possibility to build actuator arrays at very high density. The driving voltage can be defined by the film thickness, ranging from 80 μm down to 5 μm and driving field strength of 30 V/μm. In this paper we present the development of a vibrotactile display based on multilayer technology. The display is used to present several operating conditions of a machine in form of haptic information to a human finger. As an example the design of a mp3-player interface is introduced. To build up an intuitive and user friendly interface several aspects of human haptic perception have to be considered. Using the results of preliminary user tests the interface is designed and an appropriate actuator layout is derived. Controlling these actuators is important because there are many possibilities to present different information, e.g. by varying the driving parameters. A built demonstrator is used to verify the concept: a high recognition rate of more than 90% validates the concept. A characterization of mechanical and electrical parameters proofs the suitability of dielectric elastomer stack actuators for the use in mobile applications.

Practical issues in the implementation of electro-mechanical impedance technique for NDE

NASA Astrophysics Data System (ADS)

Bhalla, Suresh; Naidu, Akshay S. K.; Ong, Chin W.; Soh, Chee-Kiong

2002-11-01

The electro-mechanical impedance (EMI) technique, which utilizes "smart" piezoceramic (PZT) patches as collocated actuator-sensors, has recently emerged as a powerful technique for diagnosing incipient damages in structures and machines. This technique utilizes the electro-mechanical admittance of a PZT patch surface bonded to the structure as the diagnostic signature of the structure. The operating frequency is typically maintained in the kHz range for optimum sensitivity in damage detection. However, there are many impediments to the practical application of the technique for NDE of real-life structures, such as aerospace systems, machine parts, and civil-infrastructures like buildings and bridges. The main challenge lies in achieving consistent behavior of the bonded PZT patch over sufficiently long periods, typically of the order of years, under "harsh" environment. This necessitates protecting the PZT patch from environmental effects. This paper reports a dedicated investigation stretched over several months to ascertain the long-term consistency of the electro-mechanical admittance signatures of PZT patches. Possible protection of the patch by means of suitable covering layer as well as the effects of the layer on damage sensitivity of the patch are also investigated. It is found that a suitable cover is necessary to protect the PZT patch, especially against humidity and to ensure long life. It is also found that the patch exhibits a high sensitivity to damage even in the presence of the protection layer. The paper also includes a brief discussion on few recent applications of the EMI technique and possible use of multiplexing to optimize sensor interrogation time.

Sputter deposition of PZT piezoelectric films on thin glass substrates for adjustable x-ray optics.

PubMed

Wilke, Rudeger H T; Johnson-Wilke, Raegan L; Cotroneo, Vincenzo; Davis, William N; Reid, Paul B; Schwartz, Daniel A; Trolier-McKinstry, Susan

2013-05-10

Piezoelectric PbZr(0.52)Ti(0.48)O(3) (PZT) thin films deposited on thin glass substrates have been proposed for adjustable optics in future x-ray telescopes. The light weight of these x-ray optics enables large collecting areas, while the capability to correct mirror figure errors with the PZT thin film will allow much higher imaging resolution than possible with conventional lightweight optics. However, the low strain temperature and flexible nature of the thin glass complicate the use of chemical-solution deposition due to warping of the substrate at typical crystallization temperatures for the PZT. RF magnetron sputtering enabled preparation of PZT films with thicknesses up to 3 μm on Schott D263 glass substrates with much less deformation. X-ray diffraction analysis indicated that the films crystallized with the perovskite phase and showed no indication of secondary phases. Films with 1 cm(2) electrodes exhibited relative permittivity values near 1100 and loss tangents below 0.05. In addition, the remanent polarization was 26 μC/cm(2) with coercive fields of 33 kV/cm. The transverse piezoelectric coefficient was as high as -6.1±0.6 C/m(2). To assess influence functions for the x-ray optics application, the piezoelectrically induced deflection of individual cells was measured and compared with finite-element-analysis calculations. The good agreement between the results suggests that actuation of PZT thin films can control mirror figure errors to a precision of about 5 nm, allowing sub-arcsecond imaging.

Increasing pumping efficiency in a micro throttle pump by enhancing displacement amplification in an elastomeric substrate

NASA Astrophysics Data System (ADS)

Fujiwara, T.; Johnston, I. D.; Tracey, M. C.; Tan, C. K. L.

2010-06-01

Fluid transport is accomplished in a micro throttle pump (MTP) by alternating deformation of a micro channel cast into a polydimethylsiloxane (PDMS) elastomeric substrate. The active deformation is achieved using a bimorph PZT piezoelectric disc actuator bonded to a glass diaphragm. The bimorph PZT deflects the diaphragm as well as alternately pushing and pulling the elastomer layer providing displacement amplification in the PDMS directly surrounding the micro channel. In order to improve pumping rates we have embedded a polymethylmethacrylate (PMMA) ring into the PMDS substrate which increases the magnitude of the displacement amplification achieved. FEM simulation of the elastomeric substrate deformation predicts that the inclusion of the PMMA ring should increase the channel deformation. We experimentally demonstrate that inclusion of a PMMA ring, having a diameter equal to that of the circular node of the PZT/glass/PDMS composite, increases in the throttle resistance ratio by 40% and the maximum pumping rate by 90% compared to an MTP with no ring.

Processing of Fine-Scale Piezoelectric Ceramic/Polymer Composites for Sensors and Actuators

NASA Technical Reports Server (NTRS)

Janas, V. F.; Safari, A.

1996-01-01

The objective of the research effort at Rutgers is the development of lead zirconate titanate (PZT) ceramic/polymer composites with different designs for transducer applications including hydrophones, biomedical imaging, non-destructive testing, and air imaging. In this review, methods for processing both large area and multifunctional ceramic/polymer composites for acoustic transducers were discussed.

Development and testing of an active boring bar for increased chatter immunity

DOE Office of Scientific and Technical Information (OSTI.GOV)

Redmond, J.; Barney, P.

Recent advances in smart materials have renewed interest in the development of improved manufacturing processes featuring sensing, processing, and active control. In particular, vibration suppression in metal cutting has received much attention because of its potential for enhancing part quality while reducing the time and cost of production. Although active tool clamps have been recently demonstrated, they are often accompanied by interfacing issues that limit their applicability to specific machines. Under the auspices of the Laboratory Directed Research and Development program, the project titled {open_quotes}Smart Cutting Tools for Precision Manufacturing{close_quotes} developed an alternative approach to active vibration control in machining.more » Using the boring process as a vehicle for exploration, a commercially available tool was modified to incorporate PZT stack actuators for active suppression of its bending modes. Since the modified tool requires no specialized mounting hardware, it can be readily mounted on many machines. Cutting tests conducted on a horizontal lathe fitted with a hardened steel workpiece verify that the actively damped boring bar yields significant vibration reduction and improved surface finishes as compared to an unmodified tool.« less

Large displacement vertical translational actuator based on piezoelectric thin films.

PubMed

Qiu, Zhen; Pulskamp, Jeffrey S; Lin, Xianke; Rhee, Choong-Ho; Wang, Thomas; Polcawich, Ronald G; Oldham, Kenn

2010-07-01

A novel vertical translational microactuator based on thin-film piezoelectric actuation is presented, using a set of four compound bend-up/bend-down unimorphs to produce translational motion of a moving platform or stage. The actuation material is a chemical-solution deposited lead-zirconate-titanate (PZT) thin film. Prototype designs have shown as much as 120 μ m of static displacement, with 80-90 μ m displacements being typical, using four 920 μ m long by 70 μ m legs. Analytical models are presented that accurately describe nonlinear behavior in both static and dynamic operation of prototype stages when the dependence of piezoelectric coefficients on voltage is known. Resonance of the system is observed at a frequency of 200 Hz. The large displacement and high bandwidth of the actuators at low-voltage and low-power levels should make them useful to a variety of optical applications, including endoscopic microscopy.

Behavioral Implications of Piezoelectric Stack Actuators for Control of Micromanipulation

NASA Technical Reports Server (NTRS)

Goldfarb, Michael; Celanovic, Nikola

1996-01-01

A lumped-parameter model of a piezoelectric stack actuator has been developed to describe actuator behavior for purposes of control system analysis and design, and in particular for microrobotic applications requiring accurate position and/or force control. In addition to describing the input-output dynamic behavior, the proposed model explains aspects of non-intuitive behavioral phenomena evinced by piezoelectric actuators, such as the input-output rate-independent hysteresis and the change in mechanical stiffness that results from altering electrical load. The authors incorporate a generalized Maxwell resistive capacitor as a lumped-parameter causal representation of rate-independent hysteresis. Model formulation is validated by comparing results of numerical simulations to experimental data.

Compact piezoelectric tripod manipulator based on a reverse bridge-type amplification mechanism

NASA Astrophysics Data System (ADS)

Na, Tae-Won; Choi, Jun-Ho; Jung, Jin-Young; Kim, Hyeong-Geon; Han, Jae-Hung; Park, Kwang-Chun; Oh, Il-Kwon

2016-09-01

We report a hierarchical piezoelectric tripod manipulator based on a reverse bridge-type displacement amplifier. The reverse bridge-type amplification mechanism is pre-strained by each piezo-stack actuator up to 60 μm and is cross-stacked in a series arrangement to make a compact and high-stroke manipulator having load-bearing characteristics. The designed manipulator with three degrees of freedom is compact with a height of 56.0 mm, a diameter of 48.6 mm and total weight of 115 g. It achieves a translational stroke of up to 880 μm in heaving motion and a tilting angle of up to 2.0° in rotational motion within the operating voltage and power range of the piezoelectric stack actuator. A key feature of the present design is built-in and pre-strained displacement amplification mechanisms integrated with piezoelectric stacked actuators, resulting in a compact tripod manipulator having exceptionally high stroke and load-bearing capacity.

Wing box transonic-flutter suppression using piezoelectric self-sensing actuators attached to skin

NASA Astrophysics Data System (ADS)

Otiefy, R. A. H.; Negm, H. M.

2010-12-01

The main objective of this research is to study the capability of piezoelectric (PZT) self-sensing actuators to suppress the transonic wing box flutter, which is a flow-structure interaction phenomenon. The unsteady general frequency modified transonic small disturbance (TSD) equation is used to model the transonic flow about the wing. The wing box structure and piezoelectric actuators are modeled using the equivalent plate method, which is based on the first order shear deformation plate theory (FSDPT). The piezoelectric actuators are bonded to the skin. The optimal electromechanical coupling conditions between the piezoelectric actuators and the wing are collected from previous work. Three main different control strategies, a linear quadratic Gaussian (LQG) which combines the linear quadratic regulator (LQR) with the Kalman filter estimator (KFE), an optimal static output feedback (SOF), and a classic feedback controller (CFC), are studied and compared. The optimum actuator and sensor locations are determined using the norm of feedback control gains (NFCG) and norm of Kalman filter estimator gains (NKFEG) respectively. A genetic algorithm (GA) optimization technique is used to calculate the controller and estimator parameters to achieve a target response.

Industrial approach to piezoelectric damping of large fighter aircraft components

NASA Astrophysics Data System (ADS)

Simpson, John; Schweiger, Johannes

1998-06-01

Different concepts to damp structural vibrations of the vertical tail of fighter aircraft are reported. The various requirements for a vertical tail bias an integrated approach for the design. Several active vibrations suppression concepts had been investigated during the preparatory phase of a research program shared by Daimler-Benz Aerospace Military Aircraft (Dasa), Daimler-Benz Forschung (DBF) and Deutsche Forschungsandstalt fuer Luftund Raumfahrt (DLR). Now in the main phase of the programme, four concepts were finally chosen: two concepts with aerodynamic control surfaces and two concepts with piezoelectric components. One piezo concept approach will be described rigorously, the other concepts are briefly addressed. In the Dasa concept, thin surface piezo actuators are set out carefully to flatten the dynamic portion of the combined static and dynamic maximum bending moment loading case directly in the shell structure. The second piezo concept by DLR involves pre-loaded lead zirconate titanate (PZT)-block actuators at host structure fixtures. To this end a research apparatus was designed and built as a full scale simplified fin box with carbon fiber reinformed plastic skins and an aluminium stringer-rib substructure restrained by relevant aircraft fixtures. It constitutes a benchmark 3D-structural impedance. The engineering design incorporates 7kg of PZT surface actuators. The structural system then should be excited to more than 15mm tip displacement amplitude. This prepares the final step to total A/C integration. Typical analysis methods using cyclic thermal analogies adapted to induced load levels are compared. Commercial approaches leading onto basic state space model interpretation wrt. actuator sizing and positioning, structural integrity constraints, FE-validation and testing are described. Both piezoelectric strategies are aimed at straight open-loop performance related to concept weight penalty and input electric power. The required actuators, power and integration are then enhanced to specification standards. An adapted qualification program plan is used to improve analytical read across, specifications, manufacturing decisions, handling requirements. The next research goals are outlined.

Lifetime of dielectric elastomer stack actuators

NASA Astrophysics Data System (ADS)

Lotz, Peter; Matysek, Marc; Schlaak, Helmut F.

2011-04-01

Dielectric elastomer stack actuators (DESA) are well suited for the use in mobile devices, fluidic applications and small electromechanical systems. Despite many improvements during the last years the long term behavior of dielectric elastomer actuators in general is not known or has not been published. The first goal of the study is to characterize the overall lifetime under laboratory conditions and to identify potential factors influencing lifetime. For this we have designed a test setup to examine 16 actuators at once. The actuators are subdivided into 4 groups each with a separate power supply and driving signal. To monitor the performance of the actuators driving voltage and current are measured continuously and additionally, the amplitude of the deformations of each actuator is measured sequentially. From our first results we conclude that lifetime of these actuators is mainly influenced by the contact material between feeding line and multilayer electrodes. So far, actuators themselves are not affected by long term actuation. With the best contact material actuators can be driven for more than 2700 h at 200 Hz with an electrical field strength of 20 V/μm. This results in more than 3 billion cycles. Actually, there are further actuators driven at 10 Hz for more than 4000 hours and still working.

Impact of process parameters on the structural and electrical properties of metal/PZT/Al2O3/silicon gate stack for non-volatile memory applications

NASA Astrophysics Data System (ADS)

Singh, Prashant; Jha, Rajesh Kumar; Singh, Rajat Kumar; Singh, B. R.

2018-02-01

In this paper, we present the structural and electrical properties of the Al2O3 buffer layer on non-volatile memory behavior using Metal/PZT/Al2O3/Silicon structures. Metal/PZT/Silicon and Metal/Al2O3/Silicon structures were also fabricated and characterized to obtain capacitance and leakage current parameters. Lead zirconate titanate (PZT::35:65) and Al2O3 films were deposited by sputtering on the silicon substrate. Memory window, PUND, endurance, breakdown voltage, effective charges, flat-band voltage and leakage current density parameters were measured and the effects of process parameters on the structural and electrical characteristics were investigated. X-ray data show dominant (110) tetragonal phase of the PZT film, which crystallizes at 500 °C. The sputtered Al2O3 film annealed at different temperatures show dominant (312) orientation and amorphous nature at 425 °C. Multiple angle laser ellipsometric analysis reveals the temperature dependence of PZT film refractive index and extinction coefficient. Electrical characterization shows the maximum memory window of 3.9 V and breakdown voltage of 25 V for the Metal/Ferroelectric/Silicon (MFeS) structures annealed at 500 °C. With 10 nm Al2O3 layer in the Metal/Ferroelectric/Insulator/Silicon (MFeIS) structure, the memory window and breakdown voltage was improved to 7.21 and 35 V, respectively. Such structures show high endurance with no significant reduction polarization charge for upto 2.2 × 109 iteration cycles.

Monitoring of Grouting Compactness in a Post-Tensioning Tendon Duct Using Piezoceramic Transducers

PubMed Central

Jiang, Tianyong; Kong, Qingzhao; Wang, Wenxi; Huo, Linsheng; Song, Gangbing

2016-01-01

A post-tensioning tendon duct filled with grout can effectively prevent corrosion of the reinforcement, maintain bonding behavior between the reinforcement and concrete, and enhance the load bearing capacity of concrete structures. In practice, grouting of the post-tensioning tendon ducts always causes quality problems, which may reduce structural integrity and service life, and even cause accidents. However, monitoring of the grouting compactness is still a challenge due to the invisibility of the grout in the duct during the grouting process. This paper presents a stress wave-based active sensing approach using piezoceramic transducers to monitor the grouting compactness in real time. A segment of a commercial tendon duct was used as research object in this study. One lead zirconate titanate (PZT) piezoceramic transducer with marble protection, called a smart aggregate (SA), was bonded on the tendon and installed in the tendon duct. Two PZT patch sensors were mounted on the top outside surface of the duct, and one PZT patch sensor was bonded on the bottom outside surface of the tendon duct. In the active sensing approach, the SA was used as an actuator to generate a stress wave and the PZT sensors were utilized to detect the wave response. Cement or grout in the duct functions as a wave conduit, which can propagate the stress wave. If the cement or grout is not fully filled in the tendon duct, the top PZT sensors cannot receive much stress wave energy. The experimental procedures simulated four stages during the grout pouring process, which includes empty status, half grouting, 90% grouting, and full grouting of the duct. Experimental results show that the bottom PZT sensor can detect the signal when the grout level increases towards 50%, when a conduit between the SA and PZT sensor is formed. The top PZT sensors cannot receive any signal until the grout process is completely finished. The wavelet packet-based energy analysis was adopted in this research to compute the total signal energy received by PZT sensors. Experimental results show that the energy levels of the PZT sensors can reflect the degree of grouting compactness in the duct. The proposed method has the potential to be implemented to monitor the tendon duct grouting compactness of the reinforced concrete structures with post tensioning. PMID:27556470

Modal Characterization of a Piezoelectric Shaker Table

DTIC Science & Technology

2015-06-01

actuated shaker tables are often used for high frequency fatigue testing. Since natural frequencies can appear in the operating range of these...course of this thesis effort. I would also like to thank Dr. Tommy George and all of the helpful people in the Turbine Engine Fatigue Facility at the...4 Figure 2. Perovskite Crystal Structure of PZT Ceramics ................................................... 5 Figure 3

High-Temperature Piezoelectric Ceramic Developed

NASA Technical Reports Server (NTRS)

Sayir, Ali; Farmer, Serene C.; Dynys, Frederick W.

2005-01-01

Active combustion control of spatial and temporal variations in the local fuel-to-air ratio is of considerable interest for suppressing combustion instabilities in lean gas turbine combustors and, thereby, achieving lower NOx levels. The actuator for fuel modulation in gas turbine combustors must meet several requirements: (1) bandwidth capability of 1000 Hz, (2) operating temperature compatible with the fuel temperature, which is in the vicinity of 400 F, (3) stroke of approximately 4 mils (100 m), and (4) force of 300 lb-force. Piezoelectric actuators offer the fastest response time (microsecond time constants) and can generate forces in excess of 2000 lb-force. The state-of-the-art piezoceramic material in industry today is Pb(Zr,Ti)O3, called PZT. This class of piezoelectric ceramic is currently used in diesel fuel injectors and in the development of high-response fuel modulation valves. PZT materials are generally limited to operating temperatures of 250 F, which is 150 F lower than the desired operating temperature for gas turbine combustor fuel-modulation injection valves. Thus, there is a clear need to increase the operating temperature range of piezoceramic devices for active combustion control in gas turbine engines.

Measurement of the Length of Installed Rock Bolt Based on Stress Wave Reflection by Using a Giant Magnetostrictive (GMS) Actuator and a PZT Sensor.

PubMed

Luo, Mingzhang; Li, Weijie; Wang, Bo; Fu, Qingqing; Song, Gangbing

2017-02-23

Rock bolts, as a type of reinforcing element, are widely adopted in underground excavations and civil engineering structures. Given the importance of rock bolts, the research outlined in this paper attempts to develop a portable non-destructive evaluation method for assessing the length of installed rock bolts for inspection purposes. Traditionally, piezoelectric elements or hammer impacts were used to perform non-destructive evaluation of rock bolts. However, such methods suffered from many major issues, such as the weak energy generated and the requirement for permanent installation for piezoelectric elements, and the inconsistency of wave generation for hammer impact. In this paper, we proposed a portable device for the non-destructive evaluation of rock bolt conditions based on a giant magnetostrictive (GMS) actuator. The GMS actuator generates enough energy to ensure multiple reflections of the stress waves along the rock bolt and a lead zirconate titantate (PZT) sensor is used to detect the reflected waves. A new integrated procedure that involves correlation analysis, wavelet denoising, and Hilbert transform was proposed to process the multiple reflection signals to determine the length of an installed rock bolt. The experimental results from a lab test and field tests showed that, by analyzing the instant phase of the periodic reflections of the stress wave generated by the GMS transducer, the length of an embedded rock bolt can be accurately determined.

Measurement of the Length of Installed Rock Bolt Based on Stress Wave Reflection by Using a Giant Magnetostrictive (GMS) Actuator and a PZT Sensor

PubMed Central

Luo, Mingzhang; Li, Weijie; Wang, Bo; Fu, Qingqing; Song, Gangbing

2017-01-01

Rock bolts, as a type of reinforcing element, are widely adopted in underground excavations and civil engineering structures. Given the importance of rock bolts, the research outlined in this paper attempts to develop a portable non-destructive evaluation method for assessing the length of installed rock bolts for inspection purposes. Traditionally, piezoelectric elements or hammer impacts were used to perform non-destructive evaluation of rock bolts. However, such methods suffered from many major issues, such as the weak energy generated and the requirement for permanent installation for piezoelectric elements, and the inconsistency of wave generation for hammer impact. In this paper, we proposed a portable device for the non-destructive evaluation of rock bolt conditions based on a giant magnetostrictive (GMS) actuator. The GMS actuator generates enough energy to ensure multiple reflections of the stress waves along the rock bolt and a lead zirconate titantate (PZT) sensor is used to detect the reflected waves. A new integrated procedure that involves correlation analysis, wavelet denoising, and Hilbert transform was proposed to process the multiple reflection signals to determine the length of an installed rock bolt. The experimental results from a lab test and field tests showed that, by analyzing the instant phase of the periodic reflections of the stress wave generated by the GMS transducer, the length of an embedded rock bolt can be accurately determined. PMID:28241503

Implementation of a piezoelectrically actuated self-contained quadruped robot

NASA Astrophysics Data System (ADS)

Ho, Thanhtam; Lee, Sangyoon

2009-05-01

In this paper we present the development of a mesoscale self-contained quadruped mobile robot that employs two pieces of piezoelectric actuators for the bounding gait locomotion, i.e., two rear legs have the same movement and two front legs do too. The actuator named LIPCA (LIghtweight Piezoceramic Composite curved Actuator) is a piezocomposite actuator that uses a PZT layer that is sandwiched between composite materials of carbon/epoxy and glass/epoxy layers to amplify the displacement. A biomimetic concept is applied to the design of the robot in a simplified way, such that each leg of the robot has only one degree of freedom. Considering that LIPCA requires a high input voltage and possesses capacitive characteristics, a small power supply circuit using PICO chips is designed for the implementation of selfcontained mobile robot. The prototype with the weight of 125 gram and the length of 120 mm can locomote with the bounding gait. Experiments showed that the robot can locomote at about 50 mm/sec with the circuit on board and the operation time is about 5 minutes, which can be considered as a meaningful progress toward the goal of building an autonomous legged robot actuated by piezoelectric actuators.

Utilizing Microelectromechanical Systems (MEMS) Micro-Shutter Designs for Adaptive Coded Aperture Imaging (ACAI) Technologies

DTIC Science & Technology

2009-03-01

52 Figure 4-1: Applied voltage versus deflection curve for Poly1/Poly2 stacked 300-μm single hot-arm actuator (shown on right...58 Figure 4-2: Applied voltage versus deflection curve for Poly1/Poly2 stacked 300-μm double hot-arm actuator (shown on...61 Figure 4-5: Deflection vs. power curves for an individual wedge from

Engineering Nanoscale Multiferroic Composites for Memory Applications with Atomic Layer Deposition of Pb(ZrxTi1-x)O3 Thin Films

NASA Astrophysics Data System (ADS)

Chien, Diana

This work focuses on the development of atomic layer deposition (ALD) for lead zirconate titanate, Pb(ZrxTi1-x)O 3 (PZT). Leveraging the surface-reaction controlled process based on alternating self-limiting surface reactions, PZT can be synthesized not only with elemental precision to realize the desired composition (Zr/Ti = 52/48) but also with outstanding conformality. The latter enables the integration of PZT with a ferromagnetic phase to realize multiferroism (MF) and magnetoelectric (ME) effect. Since PZT is one of the best known ferroelectric and piezoelectric materials due the large displacements of the Pb ions at the morphotropic phase boundary, PZT based MF composites could lead to stronger ME coupling through strain coupling at the interface. Specifically, ALD PZT thin films were synthesized by using beta-diketonate metalorganic precursors Pb(TMHD)2, Zr(TMHD)4, and Ti(O.i-Pr) 2(TMHD)2 and H2O. The number of local cycles and global cycles were regulated to achieve the desired stoichiometry and thickness, respectively. ALD of PZT was studied to obtain (100) textured PZT on Pt (111) oriented platinized silicon substrates. In order to attain a highly oriented PZT thin film, a (100) textured PbTiO3 seed layer was required because PZT orientation is governed by nucleation. MF nanocomposites were engineered using ALD PZT thin films to achieve controlled complex nanoscale structures, enabling porosity to be studied as a new additional parameter for nanocomposite architectures to enhance ME effect. Specifically, 3--6 nm-thick ALD PZT thin films were deposited to uniformly coat the walls of mesoporous cobalt ferrite (CFO) template. The PZT/CFO nanocomposites were electrically poled ex-situ and the change in magnetic moment was measured. The inverse magnetoelectric coupling coefficient, a, was determined to be 85.6 Oe-cm/mV. The in-plane results show no significant change in magnetization (1--4%) as a function of electric field, which was expected due to the effect of substrate clamping. The out-of-plane magnetization showed that the mesoporous CFO coated with 3-nm-thick PZT film had a greater saturation magnetization change of 15% compared to 10% for the 6-nm-thick PZT film. This indicates that the flexibility in the partially filled pores enhances the ME coupling. Additionally, ALD PZT films were integrated between MgO and CoFeB layers to fabricate magnetic tunnel junctions (MTJ), which was the first work to demonstrate increased voltage controlled magnetic anisotropy (VCMA) effect in a complete MTJ stack using a high dielectric material within the tunnel barrier and exhibit sizeable tunneling magnetoresistance (TMR) at room temperature. The fabricated PZT MTJs with the MgO/PZT/MgO barrier demonstrated a VCMA coefficient which is ˜40% higher (20 fJ/V-m) than MgO MTJs (14 fJ/V-m) and TMR of more than 50% at room temperature, comparable to that of the MgO MTJs. The enhanced VCMA coefficient and sizeable TMR makes PZT MTJs potential candidates for future voltage-controlled, ultralow-power magnetic random access memory devices. ALD enables the growth of conformal ultra-thin PZT films, which can then be integrated to engineer nanoscale multiferroic composites for various applications.

An Optimal Image-Based Method for Identification of Acoustic Emission (AE) Sources in Plate-Like Structures Using a Lead Zirconium Titanate (PZT) Sensor Array.

PubMed

Yan, Gang; Zhou, Li

2018-02-21

This paper proposes an innovative method for identifying the locations of multiple simultaneous acoustic emission (AE) events in plate-like structures from the view of image processing. By using a linear lead zirconium titanate (PZT) sensor array to record the AE wave signals, a reverse-time frequency-wavenumber (f-k) migration is employed to produce images displaying the locations of AE sources by back-propagating the AE waves. Lamb wave theory is included in the f-k migration to consider the dispersive property of the AE waves. Since the exact occurrence time of the AE events is usually unknown when recording the AE wave signals, a heuristic artificial bee colony (ABC) algorithm combined with an optimal criterion using minimum Shannon entropy is used to find the image with the identified AE source locations and occurrence time that mostly approximate the actual ones. Experimental studies on an aluminum plate with AE events simulated by PZT actuators are performed to validate the applicability and effectiveness of the proposed optimal image-based AE source identification method.

An Optimal Image-Based Method for Identification of Acoustic Emission (AE) Sources in Plate-Like Structures Using a Lead Zirconium Titanate (PZT) Sensor Array

PubMed Central

Zhou, Li

2018-01-01

This paper proposes an innovative method for identifying the locations of multiple simultaneous acoustic emission (AE) events in plate-like structures from the view of image processing. By using a linear lead zirconium titanate (PZT) sensor array to record the AE wave signals, a reverse-time frequency-wavenumber (f-k) migration is employed to produce images displaying the locations of AE sources by back-propagating the AE waves. Lamb wave theory is included in the f-k migration to consider the dispersive property of the AE waves. Since the exact occurrence time of the AE events is usually unknown when recording the AE wave signals, a heuristic artificial bee colony (ABC) algorithm combined with an optimal criterion using minimum Shannon entropy is used to find the image with the identified AE source locations and occurrence time that mostly approximate the actual ones. Experimental studies on an aluminum plate with AE events simulated by PZT actuators are performed to validate the applicability and effectiveness of the proposed optimal image-based AE source identification method. PMID:29466310

Analytical design model for a piezo-composite unimorph actuator and its verification using lightweight piezo-composite curved actuators

NASA Astrophysics Data System (ADS)

Yoon, K. J.; Park, K. H.; Lee, S. K.; Goo, N. S.; Park, H. C.

2004-06-01

This paper describes an analytical design model for a layered piezo-composite unimorph actuator and its numerical and experimental verification using a LIPCA (lightweight piezo-composite curved actuator) that is lighter than other conventional piezo-composite type actuators. The LIPCA is composed of top fiber composite layers with high modulus and low CTE (coefficient of thermal expansion), a middle PZT ceramic wafer, and base layers with low modulus and high CTE. The advantages of the LIPCA design are to replace the heavy metal layer of THUNDER by lightweight fiber-reinforced plastic layers without compromising the generation of high force and large displacement and to have design flexibility by selecting the fiber direction and the number of prepreg layers. In addition to the lightweight advantage and design flexibility, the proposed device can be manufactured without adhesive layers when we use a resin prepreg system. A piezo-actuation model for a laminate with piezo-electric material layers and fiber composite layers is proposed to predict the curvature and residual stress of the LIPCA. To predict the actuation displacement of the LIPCA with curvature, a finite element analysis method using the proposed piezo-actuation model is introduced. The predicted deformations are in good agreement with the experimental ones.

Development of piezoelectric composites for transducers

NASA Astrophysics Data System (ADS)

Safari, A.

1994-07-01

For the past decade and a half, many different types of piezoelectric ceramic-polymer composites have been developed intended for transducer applications. These diphasic composites are prepared from non-active polymer, such as epoxy, and piezoelectric ceramic, such as PZT, in the form of filler powders, elongated fibers, multilayer and more complex three-dimensional structures. For the last four years, most of the efforts have been given to producing large area and fine scale PZT fiber composites. In this paper, processing of piezoelectric ceramic-polymer composites with various connectivity patterns are reviewed. Development of fine scale piezoelectric composites by lost mold, injection molding and the relic method are described. Research activities of different groups for preparing large area piezocomposites for hydrophone and actuator applications are briefly reviewed. Initial development of electrostrictive ceramics and composites are also

Piezoelectric Multilayer-Stacked Hybrid Actuation/Transduction System

NASA Technical Reports Server (NTRS)

Xu, Tian-Bing (Inventor); Jiang, Xiaoning (Inventor); Su, Ji (Inventor)

2014-01-01

A novel full piezoelectric multilayer stacked hybrid actuation/transduction system. The system demonstrates significantly-enhanced electromechanical performance by utilizing the cooperative contributions of the electromechanical responses of multilayer stacked negative and positive strain components. Both experimental and theoretical studies indicate that for this system, the displacement is over three times that of a same-sized conventional flextensional actuator/transducer. The system consists of at least 2 layers which include electromechanically active components. The layers are arranged such that when electric power is applied, one layer contracts in a transverse direction while the second layer expands in a transverse direction which is perpendicular to the transverse direction of the first layer. An alternate embodiment includes a third layer. In this embodiment, the outer two layers contract in parallel transverse directions while the middle layer expands in a transverse direction which is perpendicular to the transverse direction of the outer layers.

Additive manufacturing of three-dimensional (3D) microfluidic-based microelectromechanical systems (MEMS) for acoustofluidic applications.

PubMed

Cesewski, Ellen; Haring, Alexander P; Tong, Yuxin; Singh, Manjot; Thakur, Rajan; Laheri, Sahil; Read, Kaitlin A; Powell, Michael D; Oestreich, Kenneth J; Johnson, Blake N

2018-06-13

Three-dimensional (3D) printing now enables the fabrication of 3D structural electronics and microfluidics. Further, conventional subtractive manufacturing processes for microelectromechanical systems (MEMS) relatively limit device structure to two dimensions and require post-processing steps for interface with microfluidics. Thus, the objective of this work is to create an additive manufacturing approach for fabrication of 3D microfluidic-based MEMS devices that enables 3D configurations of electromechanical systems and simultaneous integration of microfluidics. Here, we demonstrate the ability to fabricate microfluidic-based acoustofluidic devices that contain orthogonal out-of-plane piezoelectric sensors and actuators using additive manufacturing. The devices were fabricated using a microextrusion 3D printing system that contained integrated pick-and-place functionality. Additively assembled materials and components included 3D printed epoxy, polydimethylsiloxane (PDMS), silver nanoparticles, and eutectic gallium-indium as well as robotically embedded piezoelectric chips (lead zirconate titanate (PZT)). Electrical impedance spectroscopy and finite element modeling studies showed the embedded PZT chips exhibited multiple resonant modes of varying mode shape over the 0-20 MHz frequency range. Flow visualization studies using neutrally buoyant particles (diameter = 0.8-70 μm) confirmed the 3D printed devices generated bulk acoustic waves (BAWs) capable of size-selective manipulation, trapping, and separation of suspended particles in droplets and microchannels. Flow visualization studies in a continuous flow format showed suspended particles could be moved toward or away from the walls of microfluidic channels based on selective actuation of in-plane or out-of-plane PZT chips. This work suggests additive manufacturing potentially provides new opportunities for the design and fabrication of acoustofluidic and microfluidic devices.

Miniaturization of Planar Horn Motors

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Ostlund, Patrick N.; Chang, Zensheu; Bao, Xiaoqi; Bar-Cohen, Yoseph; Widholm, Scott E.; Badescu, Mircea

2012-01-01

There is a great need for compact, efficient motors for driving various mechanisms including robots or mobility platforms. A study is currently underway to develop a new type of piezoelectric actuators with significantly more strength, low mass, small footprint, and efficiency. The actuators/motors utilize piezoelectric actuated horns which have a very high power density and high electromechanical conversion efficiency. The horns are fabricated using our recently developed novel pre-stress flexures that make them thermally stable and increases their coupling efficiency. The monolithic design and integrated flexures that pre-stresses the piezoelectric stack eliminates the use of stress bolt. This design allows embedding solid-state motors and actuators in any structure so that the only macroscopically moving parts are the rotor or the linear translator. The developed actuator uses a stack/horn actuation and has a Barth motor configuration, which potentially generates very large torque and speeds that do not require gearing. Finite element modeling and design tools were investigated to determine the requirements and operation parameters and the results were used to design and fabricate a motor. This new design offers a highly promising actuation mechanism that can potentially be miniaturized and integrated into systems and structures. It can be configured in many shapes to operate as multi-degrees of freedom and multi-dimensional motors/actuators including unidirectional, bidirectional, 2D and 3D. In this manuscript, we are reporting the experimental measurements from a bench top design and the results from the efforts to miniaturize the design using 2x2x2 mm piezoelectric stacks integrated into thin plates that are of the order of3 x 3x 0.2 cm.

Monolithic Flexure Pre-Stressed Ultrasonic Horns

NASA Technical Reports Server (NTRS)

Sherrit, Stewart (Inventor); Badescu, Mircea (Inventor); Allen, Phillip Grant (Inventor); Bao, Xiaoqi (Inventor); Bar-Cohen, Yoseph (Inventor)

2016-01-01

A monolithic ultrasonic horn where the horn, backing, and pre-stress structures are combined in a single monolithic piece is disclosed. Pre-stress is applied by external flexure structures. The provision of the external flexures has numerous advantages including the elimination of the need for a pre-stress bolt. The removal of the pre-stress bolt eliminates potential internal electric discharge points in the actuator. In addition, it reduces the chances of mechanical failure in the actuator stacks that result from the free surface in the hole of conventional ring stacks. In addition, the removal of the stress bolt and the corresponding reduction in the overall number of parts reduces the overall complexity of the resulting ultrasonic horn actuator and simplifies the ease of the design, fabrication and integration of the actuator of the present invention into other structures.

Monolithic Flexure Pre-Stressed Ultrasonic Horns

NASA Technical Reports Server (NTRS)

Bao, Xiaoqi (Inventor); Bar-Cohen, Yoseph (Inventor); Badescu, Mircea (Inventor); Allen, Phillip Grant (Inventor); Sherrit, Stewart (Inventor)

2015-01-01

A monolithic ultrasonic horn where the horn, backing, and pre-stress structures are combined in a single monolithic piece is disclosed. Pre-stress is applied by external flexure structures. The provision of the external flexures has numerous advantages including the elimination of the need for a pre-stress bolt. The removal of the pre-stress bolt eliminates potential internal electric discharge points in the actuator. In addition, it reduces the chances of mechanical failure in the actuator stacks that result from the free surface in the hole of conventional ring stacks. In addition, the removal of the stress bolt and the corresponding reduction in the overall number of parts reduces the overall complexity of the resulting ultrasonic horn actuator and simplifies the ease of the design, fabrication and integration of the actuator of the present invention into other structures.

Experimental measurements and finite element models of High Displacement Piezoelectric Actuators.

NASA Astrophysics Data System (ADS)

Camargo, Gilberto; Ashford, Gevale; Naco, Eris; Usher, Tim

2004-03-01

Piezoelectric actuators have many applications including morphable wing technology and piezoelectric transformers. A Piezoelectric ceramic is a material that will move when a voltage is applied and conversely produces a charge when a pressure is applied. In our study, we examine THUNDER (Thin Layer Unimorph Ferroelectric Driver and Sensor) actuators (Thunder TM is a trademark of FACE International Corporation.) Thunder actuators are constructed by bonding thin PZT piezoelectric ceramics to metal sheets. We will present physical measurements of piezoelectric actuators, as well as measurements of the displacements due to applied voltages. In our studies we used a laser micrometer to measure the dimensional characteristics of four sizes of THUNDER actuators including TH-8R, TH-9R, TH-10R, and finally the TH-11R. We also developed computer models using a commercial fine element modeling package (FEM) known as ANSYS6.0®. This software enables us to construct our models controlling such attributes as exact dimensions of the three layers of the piezoelectric actuator, the material properties of each element, the type of load that is to be applied as well as the manner in which the layers are bonded together. The computer model compares favorably with the experimental results. Acknowledgements: NASA Grant No. 0051-0078 Department of Defense (DoD) Control No.ISP02-EUG15

Monitoring of bone healing by piezoelectric-EMI method

NASA Astrophysics Data System (ADS)

Mazlina, M. H.; Sarpinah, Bibi; Tawie, Rudy; Daho, Claira Dalislone; Annuar, Ishak

2016-02-01

Smart Piezoelectric devices which have excellent piezoelectric properties have been employed for various sensor and actuators applications. The work presented here is an attempt to demonstrate the feasibility of bone healing monitoring by using piezoelectric-electromechanical impedance (EMI) method that have several advantages such as low cost, portable, light weight and simplicity in measurement. A Piezoelectric sensor (PZT) has been widely used in damage detection of various structures including concrete, pipes and bones due to their unique sensing and actuating properties. The EMI technique has emerged as a universal Structural Health Monitoring (SHM) tool suitable for almost all engineering materials and structures. The method used for this proposed study consists of put healing agent in the host structure in particular cracks bone to be monitored by PZT-needle sensor which is embedded to the host structure. The measurements were taken in the frequency range between 0.04 to 100 kHz at 1 kHz interval using AD5933 evaluation board. The signals retrieved from the AD5933 evaluation board, were quantify and analyse to obtain Root Mean Square Deviation (RMSD) percentage value. Measurements were taken every hour for 12 hours. The result from the study shows the feasibility of the piezoelectric-EMI method to effectively detect changes during bone-cracks healing process until the cracks bone is fully recovered.

The detection and quantification of the defects in adhesive bonded joints of the piezoelectric sensors by infrared thermographic nondestructive testing

NASA Astrophysics Data System (ADS)

Vinod, P. N.; Joseph, Sherin; John, Reji

2017-04-01

In this paper, efficacy of pulsed thermography technique has been explored for the first time for the detection and quantification of the subsurface defects present in the rubber-encapsulated piezoelectric sensors. Initial experiments were performed on adhesively bonded joints of the rubber/Al or rubber/PZT control samples to find out an optimum acquisition time for the 3-mm rubber encapsulants. Thermographic measurements were performed in the reflection mode and acquired thermal images were analysed and processed images were described in terms of the phase images. The defective regions are identified as delamination of the adhesive joints at the interface of rubber and PZT stacks, and presence of porosity in the encapsulation in the inspected hydrophone. The defect depths of the observed anomalies were calculated empirically from the plots of the peak time of thermal contrast (tmax) maximum and thermal contrast maximum (Cmax) for a particular defect. The estimated defect depths of the prominent porosity observed in the PZT hydrophone are found nearly 1 mm from the surface.

Tuning electro-optic susceptibity via strain engineering in artificial PZT multilayer films for high-performance broadband modulator

NASA Astrophysics Data System (ADS)

Zhu, Minmin; Du, Zehui; Li, Hongling; Chen, Bensong; Jing, Lin; Tay, Roland Ying Jie; Lin, Jinjun; Tsang, Siu Hon; Teo, Edwin Hang Tong

2017-12-01

A series of Pb(Zr1-xTix)O3 multilayer films alternatively stacked by Pb(Zr0.52Ti0.48)O3 and Pb(Zr0.35Ti0.65)O3 layers have been deposited on corning glass by magnetron sputtering. The films demonstrate pure perovskite structure and good crystallinity. A large tetragonality (c/a) of ∼1.061 and a shift of ∼0.08 eV for optical bandgap were investigated at layer engineered films. In addition, these samples exhibited a wild tunable electro-optic behavior from tens to ∼250.2 pm/V, as well as fast switching time of down to a few microseconds. The giant EO coefficient was attribute the strain-polarization coupling effect and also comparable to that of epitaxial (001) single crystal PZT thin films. The combination of high transparency, large EO effect, fast switching time, and huge phase transition temperature in PZT-based thin films show the potential on electro-optics from laser to information telecommunication.

Ferroelectric and piezoelectric responses of (110) and (001)-oriented epitaxial Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} thin films on all-oxide layers buffered silicon

DOE Office of Scientific and Technical Information (OSTI.GOV)

Vu, Hien Thu; Nguyen, Minh Duc, E-mail: minh.nguyen@itims.edu.vn; Inorganic Materials Science

2015-12-15

Graphical abstract: The cross sections show a very dense structure in the (001)-oriented films (c,d), while an open columnar growth structure is observed in the case of the (110)-oriented films (a,b). The (110)-oriented PZT films show a significantly larger longitudinal piezoelectric coefficient (d33{sub ,f}), but smaller transverse piezoelectric coefficient (d31{sub ,f}) than the (001) oriented films. - Highlights: • We fabricate all-oxide, epitaxial piezoelectric PZT thin films on Si. • The orientation of the films can be controlled by changing the buffer layer stack. • The coherence of the in-plane orientation of the grains and grain boundaries affects the ferroelectricmore » properties. • Good cycling stability of the ferroelectric properties of (001)-oriented PZT thin films. The (110)-oriented PZT thin films show a larger d33{sub ,f} but smaller d31{sub ,f} than the (001)-oriented films. - Abstract: Epitaxial ferroelectric Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PZT) thin films were fabricated on silicon substrates using pulsed laser deposition. Depending on the buffer layers and perovskite oxide electrodes, epitaxial films with different orientations were grown. (110)-oriented PZT/SrRuO{sub 3} (and PZT/LaNiO{sub 3}) films were obtained on YSZ-buffered Si substrates, while (001)-oriented PZT/SrRuO{sub 3} (and PZT/LaNiO{sub 3}) were fabricated with an extra CeO{sub 2} buffer layer (CeO{sub 2}/YSZ/Si). There is no effect of the electrode material on the properties of the films. The initial remnant polarizations in the (001)-oriented films are higher than those of (110)-oriented films, but it increases to the value of the (001) films upon cycling. The longitudinal piezoelectric d33{sub ,f} coefficients of the (110) films are larger than those of the (001) films, whereas the transverse piezoelectric d31{sub ,f} coefficients in the (110)-films are less than those in the (001)-oriented films. The difference is ascribed to the lower density (connectivity between grains) of the former films.« less

Development, Characterization and Piezoelectric Fatigue Behavior of Lead-Free Perovskite Piezoelectric Ceramics

NASA Astrophysics Data System (ADS)

Patterson, Eric Andrew

Much recent research has focused on the development lead-free perovskite piezoelectrics as environmentally compatible alternatives to lead zirconate titanate (PZT). Two main categories of lead free perovskite piezoelectric ceramic systems were investigated as potential replacements to lead zirconate titanate (PZT) for actuator devices. First, solid solutions based on Li, Ta, and Sb modified (K0.5Na0.5)NbO3 (KNN) lead-free perovskite systems were created using standard solid state methods. Secondly, Bi-based materials a variety of compositions were explored for (1-x)(Bi 0.5Na0.5)TiO3-xBi(Zn0.5Ti0.5)O 3 (BNT-BZT) and Bi(Zn0.5Ti0.5)O3-(Bi 0.5K0.5)TiO3-(Bi0.5Na0.5)TiO 3 (BZT-BKT-BNT). It was shown that when BNT-BKT is combined with increasing concentrations of Bi(Zn1/2i1/2)O3 (BZT), a transition from normal ferroelectric behavior to a material with large electric field induced strains was observed. The higher BZT containing compositions are characterized by large hysteretic strains(> 0.3%) with no negative strains that might indicate domain switching. This work summarizes and analyzes the fatigue behavior of the new generation of Pb-free piezoelectric materials. In piezoelectric materials, fatigue is observed as a degradation in the electromechanical properties under the application of a bipolar or unipolar cyclic electrical load. In Pb-based materials such as lead zirconate titanate (PZT), fatigue has been studied in great depth for both bulk and thin film applications. In PZT, fatigue can result from microcracking or electrode effects (especially in thin films). Ultimately, however, it is electronic and ionic point defects that are the most influential mechanism. Therefore, this work also analyzes the fatigue characteristics of bulk polycrystalline ceramics of the modified-KNN and BNT-BKT-BZT compositions developed. The defect chemistry that underpins the fatigue behavior will be examined and the results will be compared to the existing body of work on PZT. It will be demonstrated that while some Pb-free materials show severe property degradation under cyclic loading, other materials such as BNT-BKT-BZT essentially exhibit fatigue- free piezoelectric properties with chemical doping or other modifications. Based on these results, these new Pb-free materials have great potential for use in piezoelectric applications requiring a large number of drive cycles such as MEMS devices or high frequency actuators.

Integration of bulk piezoelectric materials into microsystems

NASA Astrophysics Data System (ADS)

Aktakka, Ethem Erkan

Bulk piezoelectric ceramics, compared to deposited piezoelectric thin-films, provide greater electromechanical coupling and charge capacity, which are highly desirable in many MEMS applications. In this thesis, a technology platform is developed for wafer-level integration of bulk piezoelectric substrates on silicon, with a final film thickness of 5-100microm. The characterized processes include reliable low-temperature (200°C) AuIn diffusion bonding and parylene bonding of bulk-PZT on silicon, wafer-level lapping of bulk-PZT with high-uniformity (+/-0.5microm), and low-damage micro-machining of PZT films via dicing-saw patterning, laser ablation, and wet-etching. Preservation of ferroelectric and piezoelectric properties is confirmed with hysteresis and piezo-response measurements. The introduced technology offers higher material quality and unique advantages in fabrication flexibility over existing piezoelectric film deposition methods. In order to confirm the preserved bulk properties in the final film, diaphragm and cantilever beam actuators operating in the transverse-mode are designed, fabricated and tested. The diaphragm structure and electrode shapes/sizes are optimized for maximum deflection through finite-element simulations. During tests of fabricated devices, greater than 12microm PP displacement is obtained by actuation of a 1mm2 diaphragm at 111kHz with <7mW power consumption. The close match between test data and simulation results suggests that the piezoelectric properties of bulk-PZT5A are mostly preserved without any necessity of repolarization. Three generations of resonant vibration energy harvesters are designed, simulated and fabricated to demonstrate the competitive performance of the new fabrication process over traditional piezoelectric deposition systems. An unpackaged PZT/Si unimorph harvester with 27mm3 active device volume produces up to 205microW at 1.5g/154Hz. The prototypes have achieved the highest figure-of-merits (normalized-power-density x bandwidth) amongst previously reported inertial energy harvesters. The fabricated energy harvester is utilized to create an autonomous energy generation platform in 0.3cm3 by system-level integration of a 50-80% efficient power management IC, which incorporates a supply-independent bias circuitry, an active diode for low-dropout rectification, a bias-flip system for higher efficiency, and a trickle battery charger. The overall system does not require a pre-charged battery, and has power consumption of <1microW in active-mode (measured) and <5pA in sleep-mode (simulated). Under lg vibration at 155Hz, a 70mF ultra-capacitor is charged from OV to 1.85V in 50 minutes.

High Performance Piezoelectric Thin Films for Shape Control in Large Inflatable Structures

NASA Technical Reports Server (NTRS)

Neurgaonkar, R. R.; Nelson, J. G.

1999-01-01

The objective of this research and development program was to develop PbZr(1-x)Ti(x)O3 (PZT) and Pb(1-x)Ba(x)Nb2O6 (PBN) materials with large piezoelectric response which are suitable for shape control in large inflatable structures. Two approaches were to be considered: (1) direct deposition of PZT and PBN films on flexible plastic or thin metal foil substrates, and (2) deposition on Si followed by fabrication of hybrid structures on mylar or kapton. Testing in shape control concepts was carried out at JPL and based on their results, the required modifications were made in the final film compositions and deposition techniques. The program objective was to identify and then optimize piezoelectric materials for NASA shape control applications. This involved the bulk piezoelectric and photovoltaic responses and the compatibility of the thin films with appropriate substrate structures. Within the PZT system, Rockwell has achieved the highest reported piezoelectric coefficient (d(sub 33) greater than 100 pC/N) of any ceramic composition. We used this experience in piezoelectric technology to establish compositions that can effectively address the issues of this program. The performance of piezoelectric thin films depends directly on d(sub ij) and Epsilon. The challenge was to find PZT compositions that maintained high d(sub ij) and Epsilon, while also exhibiting a large photovoltaic effect and integrate thin films of this composition into the system structure necessary to meet shape control applications. During the course of this program, several PZT and PLZT compositions were identified that meet these requirements. Two such compositions were successfully used in electrical and optical actuation studies of thin film structures.

High Performance Piezoelectric Thin Films for Shape Control in Large Inflatable Structures

NASA Technical Reports Server (NTRS)

Neurgaonkar, R. R.; Nelson, J. G.

1999-01-01

The objective of this research and development program was to develop PbZr(1-x)Ti(x)O3 (PZT) and Pb(1-x)Ba(x)Nb2O6 (PBN) materials with large piezoelectric response which are suitable for shape control in large inflatable structures. Two approaches were to be considered: (1) direct deposition of PZT and PBN films on flexible plastic or thin metal foil substrates, and (2) deposition on Si followed by fabrication of hybrid structures on mylar or kapton. Testing in shape control concepts was carried out at JPL and based on their results, the required modifications were made in the final film compositions and deposition techniques. The program objective was to identify and then optimize piezoelectric materials for NASA shape control applications. This involved the bulk piezoelectric and photovoltaic responses and the compatibility of the thin films with appropriate substrate structures. Within the PZT system, Rockwell has achieved the highest reported piezoelectric coefficient (d(sub 33) greater than 100 pC/N) of any ceramic composition. We used this experience in piezoelectric technology to establish compositions that can effectively address the issues of this program. The performance of piezoelectric thin films depends directly on d(sub ij) and epsilin. The challenge was to find PZT compositions that maintained high d(sub ij) and epsilon, while also exhibiting a large photovoltaic effect and integrate thin films of this composition into the system structure necessary to meet shape control applications. During the course of this program, several PZT and PLZT compositions were identified that meet these requirements. Two such compositions were successfully used in electrical and optical actuation studies of thin film structures.

High-Force Dielectric Electroactive Polymer (DEAP) membrane actuator

NASA Astrophysics Data System (ADS)

Hau, Steffen; York, Alexander; Seelecke, Stefan

2016-04-01

Energy efficiency, lightweight and scalability are key features for actuators in applications such as valves, pumps or any portable system. Dielectric electroactive Polymer (DEAP) technology is able to fulfill these requirements1 better than commonly used technology e.g. solenoids, but has limitations concerning force and stroke. However, the circular DEAP membrane actuator shows a potential increase in stroke in the mm range, when combined with an appropriate biasing mechanism2. Although, thus far, their force range is limited to the single-digit Newton range, or less3,4. This work describes how this force limit of DEAP membrane actuators can be pushed to the high double-digit Newton range and beyond. The concept for such an actuator consists of a stack of double-layered DEAPs membrane actuator combined with a biasing mechanism. These two components are combined in a novel way, which allows a compact design by integrating the biasing mechanism into the DEAP membrane actuator stack. Subsequently, the single components are manufactured, tested, and their force-displacement characteristic is documented. Utilizing this data allows assembling them into actuator systems for different applications. Two different actuators are assembled and tested (dimensions: 85x85x30mm3 (LxWxH)). The first one is able to lift 7.5kg. The second one can generate a force of 66N while acting against a spring load.

Ferroelectric hybrid fibers to develop flexible sensors for shape sensing of smart textiles and soft condensed matter bodies

NASA Astrophysics Data System (ADS)

Sebastian, Tutu; Lusiola, Tony; Clemens, Frank

2017-04-01

Piezoelectric fibers are widely used in composites for actuator and sensor applications due to its ability to convert electrical pulses into mechanical vibrations and transform the returned mechanical vibrations back into electrical signal. They are beneficial for the fabrication of composites especially 1-3 composites, active fiber composites (unidirectional axially aligned PZT fibers sandwiched between interdigitated electrodes and embedded in a polymer matrix) etc, with potential applications in medical imaging, structural health monitoring, energy harvesting, vibration and noise control. However, due to the brittle nature of PZT fibers, maximum strain is limited to 0.2% and cannot be integrated into flexible sensor applications. In this contribution, a new approach to develop flexible ferroelectric hybrid fibers for soft body shape sensing is investigated. Piezoelectric particles incorporated in a polymer matrix and extruded as fiber, 0-3 composite in fibrous form is studied. Commercially obtained calcined PZT and calcined BaTiO3 powders were used in the unsintered form to obtain flexible soft condensed matter ferroelectric hybrid fibers. The extruded fibers were subjected to investigation for their electromechanical behavior as a function of electric field. The hybrid fibers reached 10% of the maximum polarization of their sintered counterpart.

Use of piezoelectric actuators in active vibration control of rotating machinery

NASA Technical Reports Server (NTRS)

Lin, Reng Rong; Palazzolo, Alan B.; Kascak, Albert F.; Montague, Gerald

1990-01-01

Theoretical and test results for the development of piezoelectric-actuator-based active vibration control (AVC) are presented. The evolution of this technology starts with an ideal model of the actuator and progresses to a more sophisticated model where the pushers force the squirrel cage ball bearing supports of a rotating shaft. The piezoelectric pushers consist of a stack of piezoelectric ceramic disks that are arranged on top of one another and connected in parallel electrically. This model consists of a prescribed displacement that is proportional to the input voltage and a spring that represents the stiffness of the stack of piezoelectric disks. System tests were carried out to stabilize the AVC system, verify its effectiveness in controlling vibration, and confirm the theory presented.

Design and Development of an Optical Path Difference Scan Mechanism for Fourier Transform Spectrometers using High Displacement RAINBOW Actuators

NASA Technical Reports Server (NTRS)

Wise, Stephanie A.; Hardy, Robin C.; Dausch, David E.

1997-01-01

A new piezoelectric drive mechanism has been developed for optical translation in space-based spectrometer systems. The mechanism utilizes a stack of RAINBOW high displacement piezoelectric actuators to move optical components weighing less than 250 grams through a one centimeter travel. The mechanism uses the direct motion of the piezoelectric devices, stacked such that the displacement of the individual RAINBOW actuators is additive. A prototype device has been built which utilizes 21 RAINBOWs to accomplish the necessary travel. The mechanism weighs approximately 0.6 kilograms and uses less than 2 Watts of power at a scanning frequency of 0.5 Hertz, significantly less power than that required by state-of-the-art motor systems.

Elliptically Framed Tip-Tilt Mirror Optimized for Stellar Tracking

DTIC Science & Technology

2015-01-01

a rotating frame. We used the same materials as the existing tracker; however, light-weighted both the aluminum frame and Zerodur ® mirror . We...as the existing tracker; however, light-weighted both the aluminum frame and Zerodur mirror . We generated a computer-aided design model, converted it...components include an aluminum yoke and ring, glass Zerodur ®4 mirror , piezoelectric (PZT) actuators and stainless steel flexure pivot bearings5. Fig. 1

Wavelet Spectral Finite Elements for Wave Propagation in Composite Plates

DTIC Science & Technology

2012-02-21

aerospace structures is increasing rapidly due to several advantages such as lighter weight, fewer joints, improved fatigue life, and higher...breakage, and matrix cracking. These damages often occur below the surface due to fatigue , foreign object impact, etc., and may not be visible. The...ply [0/90]2s. A piezoelectric ( PZT ) actuator (diameter 13.5 mm and thickness 0.22 mm) is affixed onto the composite plate using epoxy. A National

Adaptive Structures Programs for the Strategic Defense Initiative Organization

DTIC Science & Technology

1992-01-01

Advanced Control Technology Experiment ( ACTEX ) Modular Control Patch High Frequency Passive Damping Strut Development Optional PZT Passive...on this space test bed in FY95. The Advanced Control Technology Experiment ( ACTEX ) will demonstrate many of the adaptive structures technologies...Accelerometer Bi-ax Accelerometer Smart Strut Figure 7. Schematic of Advanced Control Technology Experiment ( ACTEX ) 6-28-91-2M 1-6-92-5M PZ Stack

A new hybrid piezo-actuated compliant mechanism with self-tuned flexure arm

NASA Astrophysics Data System (ADS)

Ling, Mingxiang; Cao, Junyi

2017-04-01

Recent interests and demands for developing video-rate atomic force microscopes, high-throughput probe-based nanofabrication and high-frequency vibration generator for assisted-machining are increasingly posing new challenges for designing high-bandwidth and large-range piezo-actuated compliant mechanisms. The previous studies mainly focused on making the trade-off between natural frequency and motion range by designing a proper topology. Differing from the previous works, this paper attempts to break the deadlock by employing both piezo-stacks and piezoelectric patches to actuate compliant mechanisms. In this method, piezo-stacks provide an actuating force similar to the traditional way, while piezoelectric patches are bonded on the surface of the flexure arms in compliant mechanisms. These `active' laminaes are used to further actuate the hosting flexural beam by inducing strains on the interface and then give additional bending moments to the flexural arms, which enlarge the output displacement of the compliant mechanism while without the sacrifice of natural frequency. An analytical formulation is established to illustrate the new driving principle and the compound static behaviour of a specific hybrid piezo-actuated multistage compliant mechanism. Initial prototype is also manufactured and experimentally testing is conducted to verify the feasibility of the method.

Optimal design of a smart post-buckled beam actuator using bat algorithm: simulations and experiments

NASA Astrophysics Data System (ADS)

Mallick, Rajnish; Ganguli, Ranjan; Kumar, Ravi

2017-05-01

The optimized design of a smart post-buckled beam actuator (PBA) is performed in this study. A smart material based piezoceramic stack actuator is used as a prime-mover to drive the buckled beam actuator. Piezoceramic actuators are high force, small displacement devices; they possess high energy density and have high bandwidth. In this study, bench top experiments are conducted to investigate the angular tip deflections due to the PBA. A new design of a linear-to-linear motion amplification device (LX-4) is developed to circumvent the small displacement handicap of piezoceramic stack actuators. LX-4 enhances the piezoceramic actuator mechanical leverage by a factor of four. The PBA model is based on dynamic elastic stability and is analyzed using the Mathieu-Hill equation. A formal optimization is carried out using a newly developed meta-heuristic nature inspired algorithm, named as the bat algorithm (BA). The BA utilizes the echolocation capability of bats. An optimized PBA in conjunction with LX-4 generates end rotations of the order of 15° at the output end. The optimized PBA design incurs less weight and induces large end rotations, which will be useful in development of various mechanical and aerospace devices, such as helicopter trailing edge flaps, micro and nano aerial vehicles and other robotic systems.

Collocated tunable wavenumber sensor/actuators for smart structures

NASA Astrophysics Data System (ADS)

Jones, Lori

1994-02-01

Two actuator modules have just come out of burnout. This burnout took longer than anticipated due to power outages during January. The measurements on the smaller actuators have been repeated and agreed with the previously reported values within +/- 10%. Measurements made on a glued stack showed stiffening with increasing stress from a modulus of about 4 Mpsi at 1000 psi to 12 Mpsi at 10,000 psi applied stress -- this shows the advantage of the cofired actuator.

Micromixer based on dielectric stack actuators for medical applications

NASA Astrophysics Data System (ADS)

Solano-Arana, Susana; Klug, Florian; Mößinger, Holger; Förster-Zügel, Florentine; Schlaak, Helmut F.

2017-04-01

Based on a previously developed microperistaltic pump, a micromixer made out of dielectric elastomer stack actuators (DESA) is proposed. The micromixer will be able to mix two fluids at the microscale, pumping both fluids in and out of the device. The device consists of three chambers. In the first and second chambers, fluids A and B are hosted, while in the third chamber, fluids A and B are mixed. The fluid flow regime is laminar. The application of voltage leads to an increase of the size of a gap in the z-axis direction, due to the actuators area expansion. This makes a channel open through which the fluid flows. The frequency of the actuation of the different actuators allows an increase of the flow rate. The micromixer can be used for applications such as drug delivery and synthesis of nucleic acids, the proposed device will be made of Polydimethylsiloxane (PDMS) as dielectric and graphite powder as electrode material. PDMS is a biocompatible material, widely used in the prosthesis field. Mixing fluids at a microscale is also in need in the lab-on-achip technology for complex chemical reactions.

Fatigue in artificially layered Pb(Zr,Ti)O3 ferroelectric films

NASA Astrophysics Data System (ADS)

Jiang, A. Q.; Scott, J. F.; Dawber, M.; Wang, C.

2002-12-01

We have performed fatigue tests on lead zirconate titanate (PZT) multilayers having stacks of Pb(Zr0.8Ti0.2)O3/Pb(Zr0.2Ti0.8)O3 with repeated distances of 12 formula groups. The results are compared with single-layer n-type (0.5 at. % Ta-doped) PZT films. We conclude that fatigue is dominated by space-charge layers in each case, but that in the multilayer such space charge accumulates at the layer interfaces, rather than at the electrode-dielectric interface. The model, which includes both drift and diffusion, is quantitative and yields a rate-limiting mobility of 6.9±0.9×10-12 cm2/V s, in excellent agreement with the oxygen vacancy mobility for perovskite oxides obtained from Zafar et al.

Note: A short-pulse high-intensity molecular beam valve based on a piezoelectric stack actuator

NASA Astrophysics Data System (ADS)

Abeysekera, Chamara; Joalland, Baptiste; Shi, Yuanyuan; Kamasah, Alexander; Oldham, James M.; Suits, Arthur G.

2014-11-01

Solenoid and piezoelectric disk valves, which are widely used to generate molecular beam pulses, still suffer from significant restrictions, such as pulse durations typically >50 μs, low repetition rates, and limited gas flows and operational times. Much of this arises owing to the limited forces these actuators can achieve. To overcome these limitations, we have developed a new pulsed valve based on a high-force piezoelectric stack actuator. We show here that operation with pulse durations as low as 20 μs and repetition rates up to 100 Hz can be easily achieved by operating the valve in conjunction with a commercial fast high-voltage switch. We outline our design and demonstrate its performance with molecular beam characterization via velocity map ion imaging.

Note: a short-pulse high-intensity molecular beam valve based on a piezoelectric stack actuator.

PubMed

Abeysekera, Chamara; Joalland, Baptiste; Shi, Yuanyuan; Kamasah, Alexander; Oldham, James M; Suits, Arthur G

2014-11-01

Solenoid and piezoelectric disk valves, which are widely used to generate molecular beam pulses, still suffer from significant restrictions, such as pulse durations typically >50 μs, low repetition rates, and limited gas flows and operational times. Much of this arises owing to the limited forces these actuators can achieve. To overcome these limitations, we have developed a new pulsed valve based on a high-force piezoelectric stack actuator. We show here that operation with pulse durations as low as 20 μs and repetition rates up to 100 Hz can be easily achieved by operating the valve in conjunction with a commercial fast high-voltage switch. We outline our design and demonstrate its performance with molecular beam characterization via velocity map ion imaging.

Lead zirconate titanate thin films directly on copper electrodes for ferroelectric, dielectric and piezoelectric applications

NASA Astrophysics Data System (ADS)

Kingon, Angus I.; Srinivasan, Sudarsan

2005-03-01

Replacement of noble metal electrodes by base metals significantly lowers the cost of ferroelectric, piezoelectric and dielectric devices. Here, we demonstrate that it is possible to process lead zirconate (Pb(Zr0.52Ti0.48)O3, or PZT) thin films directly on base metal copper foils. We explore the impact of the oxygen partial pressure during processing, and demonstrate that high-quality films and interfaces can be achieved through control of the oxygen partial pressure within a narrow window predicted by thermodynamic stability considerations. This demonstration has broad implications, opening up the possibility of the use of low-cost, high-conductivity copper electrodes for a range of Pb-based perovskite materials, including PZT films in embedded printed circuit board applications for capacitors, varactors and sensors; multilayer PZT piezoelectric stacks; and multilayer dielectric and electrostrictive devices based on lead magnesium niobate-lead titanate. We also point out that the capacitors do not fatigue on repeated switching, unlike those with Pt noble metal electrodes. Instead, they appear to be fatigue-resistant, like capacitors with oxide electrodes. This may have implications for ferroelectric non-volatile memories.

Dielectric elastomer actuators used for pneumatic valve technology

NASA Astrophysics Data System (ADS)

Giousouf, Metin; Kovacs, Gabor

2013-10-01

Dielectric elastomer actuators have been investigated for applications in the field of pneumatic automation technology. We have developed different valve designs with stacked dielectric elastomer actuators and with integrated high voltage converters. The actuators were made using VHB-4910 material and a stacker machine for automated fabrication of the cylindrical actuators. Typical characteristics of pneumatic valves such as flow rate, power consumption and dynamic behaviour are presented. For valve construction the force and stroke parameters of the dielectric elastomer actuator have been measured. Further, benefits for valve applications using dielectric elastomers are shown as well as their potential operational area. Finally, challenges are discussed that are relevant for the use of elastomer actuators in valves for industrial applications.

A reconfigurable tactile display based on polymer MEMS technology

NASA Astrophysics Data System (ADS)

Wu, Xiaosong

A tactile display provides information such as shape, texture, temperature, and hardness to a user. Ultimately, a tactile display could be used to recreate a virtual object that may be stored in a computer. However, such advanced displays are not yet widely available, primarily due to the lack of low cost, large area, compact actuator arrays that can stimulate the large numbers of receptors of the user and that can also meet the high requirements for user safety and comfort. This research focuses on the development of polymer microfabrication technologies for the realization of two major components of a pneumatic tactile display: a microactuator array and a complementary microvalve (control) array. In this work, the concept, fabrication, and characterization of a kinematically-stabilized polymeric microbubble actuator ("endoskeletal microbubble actuator") is presented. A systematic design and modeling procedure was carried out to generate an optimized geometry of the corrugated diaphragm to satisfy membrane deflection, force, and stability requirements set forth by the tactile display goals. A mass-manufacturable actuator has been fabricated using the approaches of lithography and micromolding. A prototype of a single endoskeletal bubble actuator with a diameter of 2.6mm has been fabricated and characterized. In addition, in order to further reduce the size and cost of the tactile display, a microvalve array can be integrated into the tactile display system to control the pneumatic fluid that actuates the microbubble actuator. A piezoelectrically-driven and hydraulically-amplified polymer microvalve has been designed, fabricated, and tested. An incompressible elastomer was used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. The function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator has been demonstrated. Compared to present technologies, the microvalve developed can achieve large flow rate control due to its amplification mechanism, can avoid complex sealing problem because solid rather than liquid medium is used, and can form a dense valve array due to the small lateral dimension of the actuator used. To further reduce the cost of the microvalve, a laterally-laminated multilayer PZT actuator has been fabricated using diced PZT multilayer, high aspect ratio SU-8 photolithography, and molding of electrically conductive polymer composite electrodes. This fabrication process is simple and straightforward compared to previous lateral lamination approaches. An 8-layer device has shown a displacement of 0.63 micron at 100V driving voltage, which agrees well with simulation results. The lateral lamination fabrication process provides a valuable alternative for making compact, low-voltage, multilayer piezoelectric micro-actuators as microvalve driving element. A refreshable Braille cell as a tactile display prototype has been developed based on a 2x3 endoskeletal microbubble array and an array of commercial valves. The prototype can provide both a static display (which meets the displacement and force requirement of a Braille display) and vibratory tactile sensations. Along with the above capabilities, the device was designed to meet the criteria of lightness and compactness to permit portable operation. The design is scalable with respect to the number of tactile actuators while still being simple to fabricate.

Elastomer actuators: systematic improvement in properties by use of composite materials

NASA Astrophysics Data System (ADS)

Molberg, Martin; Leterrier, Yves; Plummer, Christopher J. G.; Löwe, Christiane; Opris, Dorina M.; Clemens, Frank; Månson, Jan-Anders E.

2010-04-01

Dielectric elastomer actuators (DEAs) have attracted increasing attention over the last few years owing to their outstanding properties, e.g. their large actuation strains, high energy density, and pliability, which have opened up a wide spectrum of potential applications in fields ranging from microengineering to medical prosthetics. There is consequently a huge demand for new elastomer materials with improved properties to enhance the performance of DEAs and to overcome the limitations associated with currently available materials, such as the need for high activation voltages and the poor long-term stability. The electrostatic pressure that activates dielectric elastomers can be increased by higher permittivity of the elastomer and thus may lead to lower activation voltages. This has led us to consider composite elastomeric dielectrics based on thermoplastic elastomers or PDMS, and conductive polyaniline or ceramic (soft doped PZT) powder fillers. The potential of such materials and strategies to counter the adverse effects of increased conductivity and elastic modulus are discussed.

Ability of Impedance-Based Health Monitoring To Detect Structural Damage of Propulsion System Components Assessed

NASA Technical Reports Server (NTRS)

Martin, Richard E.; Gyekenyesi, Andrew L.; Sawicki, Jerzy T.; Baaklini, George Y.

2005-01-01

Impedance-based structural-health-monitoring uses piezoelectric (PZT) patches that are bonded onto or embedded in a structure. Each individual patch behaves as both an actuator of the surrounding structural area as well as a sensor of the structural response. The size of the excited area varies with the geometry and material composition of the structure, and an active patch is driven by a sinusoidal voltage sweep. When a PZT patch is subjected to an electric field, it produces a mechanical strain; and when it is stressed, it produces an electric charge. Since the patch is bonded to the structure, driving a patch deforms and vibrates the structure. The structure then produces a localized dynamic response. This structural system response is transferred back to the PZT patch, which in turn produces an electrical response. The electromechanical impedance method is based on the principle of electromechanical coupling between the active sensor and the structure, which allows researchers to assess local structural dynamics directly by interrogating a distributed sensor array. Because of mechanical coupling between the sensor and the host structure, this mechanical effect is picked up by the sensor and, through electromechanical coupling inside the active element, is reflected in electrical impedance measured at the sensor s terminals.

Crack identification for reinforced concrete using PZT based smart rebar active sensing diagnostic network

NASA Astrophysics Data System (ADS)

Song, N. N.; Wu, F.

2016-04-01

An active sensing diagnostic system using PZT based smart rebar for SHM of RC structure has been currently under investigation. Previous test results showed that the system could detect the de-bond of concrete from reinforcement, and the diagnostic signals were increased exponentially with the de-bonding size. Previous study also showed that the smart rebar could function well like regular reinforcement to undertake tension stresses. In this study, a smart rebar network has been used to detect the crack damage of concrete based on guided waves. Experimental test has been carried out for the study. In the test, concrete beams with 2 reinforcements have been built. 8 sets of PZT elements were mounted onto the reinforcement bars in an optimized way to form an active sensing diagnostic system. A 90 kHz 5-cycle Hanning-windowed tone burst was used as input. Multiple cracks have been generated on the concrete structures. Through the guided bulk waves propagating in the structures from actuators and sensors mounted from different bars, crack damage could be detected clearly. Cases for both single and multiple cracks were tested. Different crack depths from the surface and different crack numbers have been studied. Test result shows that the amplitude of sensor output signals is deceased linearly with a propagating crack, and is decreased exponentially with increased crack numbers. From the study, the active sensing diagnostic system using PZT based smart rebar network shows a promising way to provide concrete crack damage information through the "talk" among sensors.

Electrically Induced Strain and Polarization Fatigue in Lead-Free Ceramics

NASA Astrophysics Data System (ADS)

Sommer, Daniel

Piezoelectric ceramics have traditionally been used in commercial applications such as actuators and sensors. By far the most popular piezoceramics currently in use are Pb(Zr,Ti)O3-based (PZT) ceramics. PZT ceramics are able to produce large strain and polarization with the application of an electric field, and this is due to the Morphotropic phase boundary (MPB). A MPB is associated with the boundary between tetragonal and rhombohedral perovskite phases. A disadvantage of PZT ceramics is that they contain ? 60 wt. % of lead. Since lead is toxic, this poses an environmental and health hazard because lead is released into the surroundings during fabrication and disposal. Because of this, there is a push to discover lead-free alternatives that have comparable properties to PZT but none of the health risks. One possibility is Bi 1/2(Na0.8K0.2)1/2Ti0.985 Ta0.015O3 (BNKT-1.5Ta). In addition to comparable electrical properties, any lead-free alternatives must have decent fatigue resistance to be useful for applications. This thesis focuses on the fatigue properties of BNKT-1.5Ta. The composition demonstrates high strain for a given applied electric field. To determine the fatigue resistance of BNKT-1.5Ta, data was gathered on how strain and polarization changed over number of cycles. Furthermore, fatigue tests at different temperatures were performed to ascertain if temperature affected fatigue life. X-ray diffraction (XRD) patterns and dielectric measurements were also collected to further examine any change in crystal structure and relative permittivity, respectively, before and after cycling.

Stacking Nematic Elastomers for Artificial Muscle Applications

DTIC Science & Technology

2006-04-01

nematic to isotropic phase transition. In this eport, a new approach is introduced by layering liquid crystal elastomer films to create thermally...actuated stacks. A heating element and thermally onductive grease embedded between elastomer films provide a means for rapid internal heat application...voltage application, stacks composed f two 100 m-thick films and a single heating element produce 18% strain between contracted and relaxed states. In

Note: A short-pulse high-intensity molecular beam valve based on a piezoelectric stack actuator

DOE Office of Scientific and Technical Information (OSTI.GOV)

Abeysekera, Chamara; Joalland, Baptiste; Shi, Yuanyuan

2014-11-15

Solenoid and piezoelectric disk valves, which are widely used to generate molecular beam pulses, still suffer from significant restrictions, such as pulse durations typically >50 μs, low repetition rates, and limited gas flows and operational times. Much of this arises owing to the limited forces these actuators can achieve. To overcome these limitations, we have developed a new pulsed valve based on a high-force piezoelectric stack actuator. We show here that operation with pulse durations as low as 20 μs and repetition rates up to 100 Hz can be easily achieved by operating the valve in conjunction with a commercialmore » fast high-voltage switch. We outline our design and demonstrate its performance with molecular beam characterization via velocity map ion imaging.« less

Influence of Grain Structure and Doping on the Deformation and Fracture of Polycrystalline Silicon for MEMS and NEMS

DTIC Science & Technology

2012-09-03

described in previous reports [32]. In this experimental technique, the specimen ends are gripped to loadcell and PZT actuator mounted on three dimensional...shown in Figure 3. This was due to the random distribution of columnar grains with different texture where KIC was dependent on one particular grain...Engineering: A, 268 (1-2), pp. 116-126, 1999 [19] C.P. Chen, and M.H. Leipold, "Fracture toughness of silicon", American Ceramics Society Bulletin

Theoretical Limits of Damping Attainable by Smart Beams with Rate Feedback

NASA Technical Reports Server (NTRS)

Balakrishnan, A. V.

1997-01-01

Using a generally accepted model we present a comprehensive analysis (within the page limitation) of an Euler- Bernoulli beam with PZT sensor-actuator and pure rate feedback. The emphasis is on the root locus - the dependence of the attainable damping on the feedback gain. There is a critical value of the gain beyond which the damping decreases to zero. We construct the time-domain response using semigroup theory, and show that the eigenfunctions form a Riesz basis, leading to a 'modal' expansion.

Measurement of effective piezoelectric coefficients of PZT thin films for energy harvesting application with interdigitated electrodes.

PubMed

Chidambaram, Nachiappan; Mazzalai, Andrea; Muralt, Paul

2012-08-01

Interdigitated electrode (IDE) systems with lead zirconate titanate (PZT) thin films play an increasingly important role for two reasons: first, such a configuration generates higher voltages than parallel plate capacitor-type electrode (PPE) structures, and second, the application of an electric field leads to a compressive stress component in addition to the overall stress state, unlike a PPE structure, which results in tensile stress component. Because ceramics tend to crack at relatively moderate tensile stresses, this means that IDEs have a lower risk of cracking than PPEs. For these reasons, IDE systems are ideal for energy harvesting of vibration energy, and for actuators. Systematic investigations of PZT films with IDE systems have not yet been undertaken. In this work, we present results on the evaluation of the in-plane piezoelectric coefficients with IDE systems. Additionally, we also propose a simple and measurable figure of merit (FOM) to analyze and evaluate the relevant piezoelectric parameter for harvesting efficiency without the need to fabricate the energy harvesting device. Idealized effective coefficients e(IDE) and h(IDE) are derived, showing its composite nature with about one-third contribution of the transverse effect, and about two-thirds contribution of the longitudinal effect in the case of a PZT film deposited on a (100)-oriented silicon wafer with the in-plane electric field along one of the <011> Si directions. Randomly oriented 1-μm-thick PZT 53/47 film deposited by a sol-gel technique, was evaluated and yielded an effective coefficient e(IDE) of 15 C·m(-2). Our FOM is the product between effective e and h coefficient representing twice the electrical energy density stored in the piezoelectric film per unit strain deformation (both for IDE and PPE systems). Assuming homogeneous fields between the fingers, and neglecting the contribution from below the electrode fingers, the FOM for IDE structures with larger electrode gap is derived to be twice as large as for PPE structures, for PZT-5H properties. The experiments yielded an FOM of the IDE structures of 1.25 × 10(10) J/m(3) and 14 mV/μ strain.

Design and operation of a bio-inspired micropump based on blood-sucking mechanism of mosquitoes

NASA Astrophysics Data System (ADS)

Leu, Tzong-Shyng; Kao, Ruei-Hung

2018-05-01

The study is to develop a novel bionic micropump, mimicking blood-suck mechanism of mosquitos with a similar efficiency of 36%. The micropump is produced by using micro-electro-mechanical system (MEMS) technology, PDMS (polydimethylsiloxane) to fabricate the microchannel, and an actuator membrane made by Fe-PDMS. It employs an Nd-FeB permanent magnet and PZT to actuate the Fe-PDMS membrane for generating flow rate. A lumped model theory and the Taguchi method are used for numerical simulation of pulsating flow in the micropump. Also focused is to change the size of mosquito mouth for identifying the best waveform for the transient flow processes. Based on computational results of channel size and the Taguchi method, an optimization actuation waveform is identified. The maximum pumping flow rate is 23.5 μL/min and the efficiency is 86%. The power density of micropump is about 8 times of that produced by mosquito’s suction. In addition to using theoretical design of the channel size, also combine with Taguchi method and asymmetric actuation to find the optimization actuation waveform, the experimental result shows the maximum pumping flowrate is 23.5 μL/min and efficiency is 86%, moreover, the power density of micropump is 8 times higher than mosquito’s.

A small biomimetic quadruped robot driven by multistacked dielectric elastomer actuators

NASA Astrophysics Data System (ADS)

Nguyen, Canh Toan; Phung, Hoa; Dat Nguyen, Tien; Lee, Choonghan; Kim, Uikyum; Lee, Donghyouk; Moon, Hyungpil; Koo, Jachoon; Nam, Jae-do; Ryeol Choi, Hyouk

2014-06-01

A kind of dielectric elastomer (DE) material, called ‘synthetic elastomer’, has been developed based on acrylonitrile butadiene rubber (NBR) to be used as a dielectric elastomer actuator (DEA). By stacking single layers of synthetic elastomer, a linear actuator, called a multistacked actuator, is produced, and used by mechatronic and robotic systems to generate linear motion. In this paper, we demonstrate the application of the multistacked dielectric elastomer actuator in a biomimetic legged robot. A miniature robot driven by a biomimetic actuation system with four 2-DOF (two-degree-of-freedom) legged mechanisms is realized. Based on the experimental results, we evaluate the performance of the proposed robot and validate the feasibility of the multistacked actuator in a locomotion system as a replacement for conventional actuators.

Electrostatic micromembrane actuator arrays as motion generator

NASA Astrophysics Data System (ADS)

Wu, X. T.; Hui, J.; Young, M.; Kayatta, P.; Wong, J.; Kennith, D.; Zhe, J.; Warde, C.

2004-05-01

A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems (MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10-200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMS mirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.

Occupancy-driven smart register for building energy saving (Conference Presentation)

NASA Astrophysics Data System (ADS)

Chen, Zhangjie; Wang, Ya S.

2017-04-01

The new era in energy-efficiency building is to integrate automatic occupancy detection with automated heating, ventilation and cooling (HVAC), the largest source of building energy consumption. By closing off some air vents, during certain hours of the day, up to 7.5% building energy consumption could be saved. In the past, smart vent has received increasing attention and several products have been developed and introduced to the market for building energy saving. For instance, Ecovent Systems Inc. and Keen Home Inc. have both developed smart vent registers capable of turning the vent on and off through smart phone apps. However, their products do not have on-board occupancy sensors and are therefore open-loop. Their vent control was achieved by simply positioning the vent blade through a motor and a controller without involving any smart actuation. This paper presents an innovative approach for automated vent control and automatic occupancy (human subjects) detection. We devise this approach in a smart register that has polydimethylsiloxane (PDMS) frame with embedded Shape memory alloy (SMA) actuators. SMAs belong to a class of shape memory materials (SMMs), which have the ability to `memorise' or retain their previous form when subjected to certain stimulus such as thermomechanical or magnetic variations. And it can work as actuators and be applied to vent control. Specifically, a Ni-Ti SMA strip will be pre-trained to a circular shape, wrapped with a Ni-Cr resistive wire that is coated with thermally conductive and electrically isolating material. Then, the SMA strip along with an antagonistic SMA strip will be bonded with PZT sensor and thermal sensors, to be inserted into a 3D printed mould which will be filled with silicone rubber materials. In the end, a demoulding process yields a fully integrated blade of the smart register. Several blades are installed together to form the smart register. The PZT sensors can feedback the shape of the actuator for precise shape and air flow control. The performance and the specification of the smart registers will be characterized experimentally. Its capacity of regulating airflow, forming air curtain will be demonstrated.

A novel ultra-planar, long-stroke and low-voltage piezoelectric micromirror

NASA Astrophysics Data System (ADS)

Bakke, Thor; Vogl, Andreas; Żero, Oleg; Tyholdt, Frode; Johansen, Ib-Rune; Wang, Dag

2010-06-01

A novel piston-type micromirror with a stroke of up to 20 µm at 20 V formed out of a silicon-on-insulator wafer with integrated piezoelectric actuators was designed, fabricated and characterized. The peak-to-valley planarity of a 2 mm diameter mirror was better than 15 nm, and tip-to-tip tilt upon actuation less than 30 nm. A resonance frequency of 9.8 kHz was measured. Analytical and finite element models were developed and compared to measurements. The design is based on a silicon-on-insulator wafer where the circular mirror is formed out of the handle silicon, thus forming a thick, highly rigid and ultra-planar mirror surface. The mirror plate is connected to a supporting frame through a membrane formed out of the device silicon layer. A piezoelectric actuator made of lead-zirconate-titanate (PZT) thin film is structured on top of the membrane, providing mirror deflection by deformation of the membrane. Two actuator designs were tested: one with a single ring and the other with a double ring providing bidirectional movement of the mirror. The fabricated mirrors were characterized by white light interferometry to determine the static and temporal response as well as mirror planarity.

Scalable, MEMS-enabled, vibrational tactile actuators for high resolution tactile displays

NASA Astrophysics Data System (ADS)

Xie, Xin; Zaitsev, Yuri; Velásquez-García, Luis Fernando; Teller, Seth J.; Livermore, Carol

2014-12-01

The design, fabrication, and characterization of a new type of tactile display for people with blindness or low vision is reported. Each tactile element comprises a piezoelectric extensional actuator that vibrates in plane, with a microfabricated scissor mechanism to convert the in-plane actuations into robust, higher-amplitude, out-of-plane (vertical) vibrations that are sensed with the finger pads. When the tactile elements are formed into a 2D array, information can be conveyed to the user by varying the pattern of vibrations in space and time. Analytical models and finite element analysis were used to design individual tactile elements, which were implemented with PZT actuators and both SU-8 and 3D-printed scissor amplifiers. The measured displacements of these 3 mm × 10 mm, MEMS-enabled tactile elements exceed 10 µm, in agreement with models, with measured forces exceeding 45 mN. The performance of the MEMS-enabled tactile elements is compared with the performance of larger, fully-macroscale tactile elements to demonstrate the scale dependence of the devices. The creation of a 28-element prototype is also reported, and the qualitative user experience with the individual tactile elements and displays is described.

Electrothermal actuation based on carbon nanotube network in silicone elastomer

NASA Astrophysics Data System (ADS)

Chen, L. Z.; Liu, C. H.; Hu, C. H.; Fan, S. S.

2008-06-01

The authors report an electrothermal actuator, which is fabricated by involving carbon nanotube network into the silicone elastomer. The actuators exhibit excellent performances as good as normal dielectric elastomer actuators while working under much lower voltages (e.g., 1.5Vmm-1). They are longitudinal actuators and there is no need for stacking or rolling sheets of materials. In addition, they can satisfy the demand of different voltage applications ranging from dozens of voltages to thousands of voltages by using different carbon nanotube loading composites. Visible maximal strain of 4.4% occurs at an electric power intensity around 0.03Wmm-3.

Impedance-based structural health monitoring of wind turbine blades

NASA Astrophysics Data System (ADS)

Pitchford, Corey; Grisso, Benjamin L.; Inman, Daniel J.

2007-04-01

Wind power is a fast-growing source of non-polluting, renewable energy with vast potential. However, current wind turbine technology must be improved before the potential of wind power can be fully realized. Wind turbine blades are one of the key components in improving this technology. Blade failure is very costly because it can damage other blades, the wind turbine itself, and possibly other wind turbines. A successful damage detection system incorporated into wind turbines could extend blade life and allow for less conservative designs. A damage detection method which has shown promise on a wide variety of structures is impedance-based structural health monitoring. The technique utilizes small piezoceramic (PZT) patches attached to a structure as self-sensing actuators to both excite the structure with high-frequency excitations, and monitor any changes in structural mechanical impedance. By monitoring the electrical impedance of the PZT, assessments can be made about the integrity of the mechanical structure. Recently, advances in hardware systems with onboard computing, including actuation and sensing, computational algorithms, and wireless telemetry, have improved the accessibility of the impedance method for in-field measurements. This paper investigates the feasibility of implementing such an onboard system inside of turbine blades as an in-field method of damage detection. Viability of onboard detection is accomplished by running a series of tests to verify the capability of the method on an actual wind turbine blade section from an experimental carbon/glass/balsa composite blade developed at Sandia National Laboratories.

Single Piezo-Actuator Rotary-Hammering Drill

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Bao, Xiaoqi; Badescu, Mircea; Bar-Cohen, Yoseph

2011-01-01

This innovation comprises a compact drill that uses low-axial preload, via vibrations, that fractures the rock under the bit kerf, and rotates the bit to remove the powdered cuttings while augmenting the rock fracture via shear forces. The vibrations fluidize the powered cuttings inside the flutes around the bit, reducing the friction with the auger surface. These combined actions reduce the consumed power and the heating of the drilled medium, helping to preserve the pristine content of the produced samples. The drill consists of an actuator that simultaneously impacts and rotates the bit by applying force and torque via a single piezoelectric stack actuator without the need for a gearbox or lever mechanism. This reduces the development/fabrication cost and complexity. The piezoelectric actuator impacts the surface and generates shear forces, fragmenting the drilled medium directly under the bit kerf by exceeding the tensile and/or shear strength of the struck surface. The percussive impact action of the actuator leads to penetration of the medium by producing a zone of finely crushed rock directly underneath the struck location. This fracturing process is highly enhanced by the shear forces from the rotation and twisting action. To remove the formed cuttings, the bit is constructed with an auger on its internal or external surface. One of the problems with pure hammering is that, as the teeth become embedded in the sample, the drilling efficiency drops unless the teeth are moved away from the specific footprint location. By rotating the teeth, they are moved to areas that were not fragmented, and thus the rock fracturing is enhanced via shear forces. The shear motion creates ripping or chiseling action to produce larger fragments to increase the drilling efficiency, and to reduce the required power. The actuator of the drill consists of a piezoelectric stack that vibrates the horn. The stack is compressed by a bolt between the backing and the horn in order to prevent it from being subjected to tensile stress that will cause it to fail. The backing is intended to transfer the generated mechanical vibrations towards the horn. In order to cause rotation, the horn is configured asymmetrically with helical segments and, upon impacting the bit, it introduces longitudinal along the axis of the actuator and tangential force causing twisting action that rotates the bit. The longitudinal component of the vibrations of the stack introduces percussion impulses between the bit and the rock to fracture it when the ultimate strain is exceeded under the bit.

Analysis of the Impedance Resonance of Piezoelectric Multi-Fiber Composite Stacks

NASA Technical Reports Server (NTRS)

Sherrit, S.; Djrbashian, A.; Bradford, S C

2013-01-01

Multi-Fiber CompositesTM (MFC's) produced by Smart Materials Corp behave essentially like thin planar stacks where each piezoelectric layer is composed of a multitude of fibers. We investigate the suitability of using previously published inversion techniques for the impedance resonances of monolithic co-fired piezoelectric stacks to the MFCTM to determine the complex material constants from the impedance data. The impedance equations examined in this paper are those based on the derivation. The utility of resonance techniques to invert the impedance data to determine the small signal complex material constants are presented for a series of MFC's. The technique was applied to actuators with different geometries and the real coefficients were determined to be similar within changes of the boundary conditions due to change of geometry. The scatter in the imaginary coefficient was found to be larger. The technique was also applied to the same actuator type but manufactured in different batches with some design changes in the non active portion of the actuator and differences in the dielectric and the electromechanical coupling between the two batches were easily measureable. It is interesting to note that strain predicted by small signal impedance analysis is much lower than high field stains. Since the model is based on material properties rather than circuit constants, it could be used for the direct evaluation of specific aging or degradation mechanisms in the actuator as well as batch sorting and adjustment of manufacturing processes.

Critical dimensional linewidth calibration using UV microscope and laser interferometry

NASA Astrophysics Data System (ADS)

Li, Qi; Gao, Si-tian; Li, Wei; Lu, Ming-zhen; Zhang, Ming-kai

2013-10-01

In order to calibrate the critical dimensional (CD) uncertainty of lithography masks in semiconductor manufacturing, NIM is building a two dimensional metrological UV microscope which has traceable measurement ability for nanometer linewidths and pitches. The microscope mainly consists of UV light receiving components, piezoelectric ceramics (PZT) driven stage and interferometer calibration framework. In UV light receiving components they include all optical elements on optical path. The UV light originates from Köhler high aperture transmit/reflect illumination sources; then goes through objective lens to UV splitting optical elements; after that, one part of light attains UV camera for large range calibration, the other part of light passes through a three dimensional adjusted pinhole and is collected by PMT for nanoscale scanning. In PZT driven stage, PZT stick actuators with closed loop control are equipped to push/pull a flexural hinge based platform. The platform has a novel designed compound flexural hinges which nest separate X, Y direction moving mechanisms within one layer but avoiding from mutual cross talk, besides this, the hinges also contain leverage structures to amplify moving distance. With these designs, the platform can attain 100 μm displacement ranges as well as 1 nm resolution. In interferometer framework a heterodyne multi-pass interferometer is mounted on the platform, which measures X-Y plane movement and Z axis rotation, through reference mirror mounted on objective lens tube and Zerodur mirror mounted on PZT platform, the displacement is traced back to laser wavelength. When development is finished, the apparatus can offer the capability to calibrate one dimensional linewidths and two dimensional pitches ranging from 200nm to 50μm with expanded uncertainty below 20nm.

Experimental investigation on sandwich structure ring-type ultrasonic motor.

PubMed

Peng, Taijiang; Shi, Hongyan; Liang, Xiong; Luo, Feng; Wu, Xiaoyu

2015-02-01

This paper presents a manufacture method for a sandwich structure Ultrasonic Motor (USM) and experiment. Two pieces of rotor clamped on a stator, and a stainless steel disk-spring is bonded on the hollow rotor disk to provide the press by a nut assembled on the shaft. The stator is made of a double-side Printed-Circuit Board (PCB) which is sawed out the ring in the center and connected on the board with three legs. On each side of the ring surface, there are electrodes connected at the same position via through hole. The three layer drive circuit for sine, cosine, and ground signal is connected on the board through each leg. There are many piezoelectric components (PZT) bonded between two electrodes and fill soldering tin on each electrode. Then PZT is welded on PCB by reflow soldering. Finally, rub the gibbous soldering tin down to the position of PZT surface makes sure the surface contacts with rotor evenly. The welding process can also be completed by Surface Mounted Technology (SMT). A prototype motor is manufactured by this method. Two B03 model shapes of the stator are obtained by the finite element analysis and the optimal frequency of the motor is 56.375 kHz measured by impedance instrument. The theoretical analysis is conducted for the relationship between the revolving speed of the USM and thickness of stator ring, number of the travelling waves, PZT amplitude, frequency and the other parameters. The experiment result shows that the maximum revolving speed is 116 RPM and the maximum torque is 25 N mm, when the actuate voltage is 200 VAC. Copyright © 2014 Elsevier B.V. All rights reserved.

Design and Optimization of Ultrasonic Vibration Mechanism using PZT for Precision Laser Machining

NASA Astrophysics Data System (ADS)

Kim, Woo-Jin; Lu, Fei; Cho, Sung-Hak; Park, Jong-Kweon; Lee, Moon G.

As the aged population grows around the world, many medical instruments and devices have been developed recently. Among the devices, a drug delivery stent is a medical device which requires precision machining. Conventional drug delivery stent has problems of residual polymer and decoating because the drug is coated on the surface of stent with the polymer. If the drug is impregnated in the micro sized holes on the surface, the problems can be overcome because there is no need to use the polymer anymore. Micro sized holes are generally fabricated by laser machining; however, the fabricated holes do not have a high aspect ratio or a good surface finish. To overcome these problems, we propose a vibration-assisted machining mechanism with PZT (Piezoelectric Transducers) for the fabrication of micro sized holes. If the mechanism vibrates the eyepiece of the laser machining head, the laser spot on the workpiece will vibrate vertically because objective lens in the eyepiece shakes by the mechanism's vibration. According to the former researches, the vibrating frequency over 20 kHz and amplitude over 500 nm are preferable. The vibration mechanism has cylindrical guide, hollowed PZT and supports. In the cylinder, the eyepiece is mounted. The cylindrical guide has upper and low plates and side wall. The shape of plates and side wall are designed to have high resonating frequency and large amplitude of motion. The PZT is also selected to have high actuating force and high speed of motion. The support has symmetrical and rigid configuration. The mechanism secures linear motion of the eyepiece. This research includes sensitivity analysis and design of ultrasonic vibration mechanism. As a result of design, the requirements of high frequency and large amplitude are achieved.

New modeling method and mechanism analyses for active control of interior noise in an irregular enclosure using piezoelectric actuators.

PubMed

Geng, Hou C; Rao, Zhu S; Han, Zu S

2003-03-01

A new modeling method is developed in this paper for the active minimization of noise within a three-dimensional irregular enclosure using distributed lead zirconate titanate piezoelectric (PZT) actuators, and the control mechanisms for irregular enclosure are analyzed. The irregular enclosure is modeled with four rigid walls and two simply supported flexible panels, and PZT actuators are bound to one of the flexible panels. The process of the new modeling method is as follows. First, the modal coupling method is used to establish the motion equations, which contain important coefficients such as modal masses and modal coupling coefficients, etc., of acoustic-structural-piezoelectric coupling system. Then, the acoustic modes and the modal masses of irregular enclosure are calculated by numerical methods. Last, the modal coupling coefficients in motion equations are calculated according to the numerical results of the acoustic modes of irregular enclosure and the modes of two panels. The validity of this modeling method is verified by a regular hexahedron enclosure. Two cost functions are applied to this model. With the two cost functions, good results are obtained in minimizing the sound-pressure level (SPL) within irregular enclosure according to numerical investigations. By comparing the results obtained under controlled and uncontrolled states, the control mechanisms of the system are discussed. It is found that the control mechanisms vary with disturbance frequencies. At most disturbance frequencies, the SPL within enclosure is reduced by restructuring the modes of two panels simultaneously. When the disturbance frequency comes close to one of the natural frequencies of panel a, the dominant mode of panel a is suppressed, while the modes of panel b are reconstructed. While the disturbance frequency is near one of the natural frequencies of panel b, the modes of two panels are restructured at the same time.

Stacked dielectric elastomer actuator (SDEA): casting process, modeling and active vibration isolation

NASA Astrophysics Data System (ADS)

Li, Zhuoyuan; Sheng, Meiping; Wang, Minqing; Dong, Pengfei; Li, Bo; Chen, Hualing

2018-07-01

In this paper, a novel fabrication process of stacked dielectric elastomer actuator (SDEA) is developed based on casting process and elastomeric electrode. The so-fabricated SDEA benefits the advantages of homogenous and reproducible properties as well as little performance degradation after one-year use. A coupling model of SDEA is established by taking into consideration of the elastomeric electrode and the calculated results agree with the experiments. Based on the model, we attain the method to optimize the SDEA’s parameters. Finally, the SDEA is used as an isolator in active vibration isolation system to verify the feasibility in dynamic application. And the experiment results show a great prospect for SDEA in such application.

Micro-fabrication of a novel linear actuator

NASA Astrophysics Data System (ADS)

Jiang, Shuidong; Liu, Lei; Hou, Yangqing; Fang, Houfei

2017-04-01

The novel linear actuator is researched with light weight, small volume, low power consumption, fast response and relatively large displacement output. It can be used for the net surface control of large deployable mesh antennas, the tension precise adjustment of the controlled cable in the tension and tensile truss structure and many other applications. The structure and the geometry parameters are designed and analysed by finite element method in multi-physics coupling. Meantime, the relationship between input voltage and displacement output is computed, and the strength check is completed according to the stress distribution. Carbon fiber reinforced composite (CFRC), glass fiber reinforced composited (GFRC), and Lead Zirconium Titanate (PZT) materials are used to fabricate the actuator by using laser etching and others MEMS process. The displacement output is measured by the laser displacement sensor device at the input voltage range of DC0-180V. The response time is obtained by oscilloscope at the arbitrarily voltage in the above range. The nominal force output is measured by the PTR-1101 mechanics setup. Finally, the computed and test results are compared and analysed.

Fatigue life characterization for piezoelectric macrofiber composites

NASA Astrophysics Data System (ADS)

Henslee, Isaac A.; Miller, David A.; Tempero, Tyler

2012-10-01

In an effort to aid the investigation into lightweight and reliable materials for actuator design, a study was developed to characterize the temperature-dependent lifetime performance of a piezoelectric macrofiber composite (MFC). MFCs are thin rectangular patches of polyimide film, epoxy and a single layer of rectangular lead zirconium titanate (PZT) fibers. In this study, the useful life of the MFC is characterized to determine the effect of temperature on the performance of the composite as it is fatigued by cyclic piezoelectric excitation. The test specimen consists of the MFC laminated to a cantilevered stainless steel beam. Beam strain and tip displacement measurements are used as a basis for determining the performance of the MFC as it is cyclically actuated under various operating temperatures. The temperature of the beam laminate is held constant and then cycled to failure, or 250 million cycles, in order to determine the useful life of the MFC over a temperature range from - 15 to 145 °C. The results of the experiments show a strong temperature dependence of the operational life for the MFC. Damage inside the composite was identified through in situ visual inspection and during post-test microstructural observation; however, no degradation in operational performance was identified as it was cyclically actuated up to the point of failure, regardless of temperature or actuation cycle number.

Macro Fiber Piezocomposite Actuator Poling Study

NASA Technical Reports Server (NTRS)

Werlink, Rudy J.; Bryant, Robert G.; Manos, Dennis

2002-01-01

The performance and advantages of Piezocomposite Actuators are to provide a low cost, in-situ actuator/sensor that is flexible, low profile and high strain per volt performance in the same plane of poled voltage. This paper extends reported data for the performance of these Macrofiber Composite (MFC) Actuators to include 4 progressively narrower Intedigitized electrode configurations with several line widths and spacing ratios. Data is reported for max free strain, average strain per applied volt, poling (alignment of the electric dipoles of the PZT ceramic) voltage vs. strain and capacitance, time to poling voltage 95% saturation. The output strain per volt progressively increases as electrode spacing decreases, with saturation occurring at lower poling voltages. The narrowest spacing ratio becomes prone to voltage breakdown or short circuits limiting the spacing width with current fabrication methods. The capacitance generally increases with increasing poling voltage level but has high sensitivity to factors such as temperature, moisture and time from poling which limit its usefulness as a simple indicator. The total time of applied poling voltage to saturate or fully line up the dipoles in the piezoceramic was generally on the order of 5-20 seconds. Less sensitivity to poling due to the applied rate of voltage increase over a 25 to 500 volt/second rate range was observed.

Triple degree-of-freedom piezoelectric ultrasonic micromotor via flexural-axial coupled vibration.

PubMed

Khoo, Ter Fong; Dang, Dinh Huy; Friend, James; Oetomo, Denny; Yeo, Leslie

2009-08-01

Actuators remain a limiting factor in robotics, especially in microrobotics where the power density of actuators is a problem. A 3 x 3 x 8.7 mm 3-axis piezoelectric ultrasonic micromotor system is described here in an effort to help solve this problem. Formed from 4 bulk lead zirconate titanate (PZT) thickness-polarized elements placed around the periphery of a rectangular rod, the stator is designed to combine axial and flexural vibrations in a way that permits rotation of a hardened steel ball as a rotor about an arbitrary axis. A simple prototype of the micromotor was found to produce at least a rotation speed of 10.4 rad/s with 4 microN-m torque about all 3 orthogonal directions at an excitation frequency of about 221 kHz, demonstrating the feasibility of a 3 degree-of-freedom millimeter-scale piezoelectric motor.

Refreshable Braille displays using EAP actuators

NASA Astrophysics Data System (ADS)

Bar-Cohen, Yoseph

2010-04-01

Refreshable Braille can help visually impaired persons benefit from the growing advances in computer technology. The development of such displays in a full screen form is a great challenge due to the need to pack many actuators in small area without interferences. In recent years, various displays using actuators such as piezoelectric stacks have become available in commercial form but most of them are limited to one line Braille code. Researchers in the field of electroactive polymers (EAP) investigated methods of using these materials to form full screen displays. This manuscript reviews the state of the art of producing refreshable Braille displays using EAP-based actuators.

Refreshable Braille Displays Using EAP Actuators

NASA Technical Reports Server (NTRS)

Bar-Cohen, Yoseph

2010-01-01

Refreshable Braille can help visually impaired persons benefit from the growing advances in computer technology. The development of such displays in a full screen form is a great challenge due to the need to pack many actuators in small area without interferences. In recent years, various displays using actuators such as piezoelectric stacks have become available in commercial form but most of them are limited to one line Braille code. Researchers in the field of electroactive polymers (EAP) investigated methods of using these materials to form full screen displays. This manuscript reviews the state of the art of producing refreshable Braille displays using EAP-based actuators..

A modified barbell-shaped PNN-PZT-PIN piezoelectric ceramic energy harvester

NASA Astrophysics Data System (ADS)

Gao, Xiangyu; Wu, Jingen; Yu, Yang; Dong, Shuxiang

2017-11-01

The quaternary system of relaxor-ferroelectric based Pb(Ni1/3Nb2/3)O3-Pb(ZrxTi1-x)O3-Pb(In0.5Nb0.5)O3 (PNN-PZT-PIN) piezoelectric ceramic at the morphotropic phase boundary was investigated via the solid reaction method. The optimized ceramic with excellent electric properties of ɛr = 8084, d33 = 977 pC/N, kp = 0.61, and Ec = 3.0 kV/cm was fabricated into d33-mode discs with separated surface electrodes, which were arranged in a series connection and, then as a piezo-stack, assembled into a barbell-shaped energy harvester that could bear a strong mechanical vibration. It is found that under a vibration mass-induced bending moment, the energy harvester produces an open circuit voltage of 26.4 Vp-p at the acceleration of 2.5 g at a load of 1.56 MΩ, which is two times higher in comparison to one without surface electrode separation. Its power output is 30 μW at the acceleration of 1 g and 104 μW at 2.5 g, which are even six times higher than that of a previously reported barbell-shaped energy harvester at room-temperature with the same acceleration. The enhanced power output can be attributed to (i) the excellent piezoelectric response of PNN-PZT-PIN ceramic and (ii) harvesting positive and negative charges from the separated surface electrodes other than a full surface electrode on piezoelectric discs under bending moment. Furthermore, the practical test was performed within a car engine, which shows that the PNN-PZT-PIN piezoelectric ceramic is a promising candidate for vibration energy harvesting.

Development of an active isolation mat based on dielectric elastomer stack actuators for mechanical vibration cancellation

NASA Astrophysics Data System (ADS)

Karsten, Roman; Flittner, Klaus; Haus, Henry; Schlaak, Helmut F.

2013-04-01

This paper describes the development of an active isolation mat for cancelation of vibrations on sensitive devices with a mass of up to 500 gram. Vertical disturbing vibrations are attenuated actively while horizontal vibrations are damped passively. The dimensions of the investigated mat are 140 × 140 × 20 mm. The mat contains 5 dielectric elastomer stack actuators (DESA). The design and the optimization of active isolation mat are realized by ANSYS FEM software. The best performance shows a DESA with air cushion mounted on its circumference. Within the mounting encased air increases static and reduces dynamic stiffness. Experimental results show that vibrations with amplitudes up to 200 μm can be actively eliminated.

A process chain for integrating piezoelectric transducers into aluminum die castings to generate smart lightweight structures

NASA Astrophysics Data System (ADS)

Stein, Stefan; Wedler, Jonathan; Rhein, Sebastian; Schmidt, Michael; Körner, Carolin; Michaelis, Alexander; Gebhardt, Sylvia

The application of piezoelectric transducers to structural body parts of machines or vehicles enables the combination of passive mechanical components with sensor and actuator functions in one single structure. According to Herold et al. [1] and Staeves [2] this approach indicates significant potential regarding smart lightweight construction. To obtain the highest yield, the piezoelectric transducers need to be integrated into the flux of forces (load path) of load bearing structures. Application in a downstream process reduces yield and process efficiency during manufacturing and operation, due to the necessity of a subsequent process step of sensor/actuator application. The die casting process offers the possibility for integration of piezoelectric transducers into metal structures. Aluminum castings are particularly favorable due to their high quality and feasibility for high unit production at low cost (Brunhuber [3], Nogowizin [4]). Such molded aluminum parts with integrated piezoelectric transducers enable functions like active vibration damping, structural health monitoring or energy harvesting resulting in significant possibilities of weight reduction, which is an increasingly important driving force of automotive and aerospace industry (Klein [5], Siebenpfeiffer [6]) due to increasingly stringent environmental protection laws. In the scope of those developments, this paper focuses on the entire process chain enabling the generation of lightweight metal structures with sensor and actuator function, starting from the manufacturing of piezoelectric modules over electrical and mechanical bonding to the integration of such modules into aluminum (Al) matrices by die casting. To achieve this challenging goal, piezoceramic sensors/actuator modules, so-called LTCC/PZT modules (LPM) were developed, since ceramic based piezoelectric modules are more likely to withstand the thermal stress of about 700 °C introduced by the casting process (Flössel et al., [7]). The modules are made of low temperature cofired ceramic (LTCC) tapes with an embedded lead zirconate titanate (PZT) plate and are manufactured in multilayer technique. For joining conducting copper (Cu) wires with the electrode structure of the LPM, a novel laser drop on demand wire bonding method (LDB) is applied, which is based on the melting of a spherical CuSn12 braze preform with a liquidus temperature Tliquid of 989.9 °C (Deutsches Kupfer-Institut Düsseldorf, [8]) providing sufficient thermal stability for a subsequent casting process.

EDITORIAL Smart materials, multifunctional composites, and morphing structures: selected papers from the 20th International Conference on Adaptive Structures and Technologies (ICAST 2009) Smart materials, multifunctional composites, and morphing structures: selected papers from the 20th International Conference on Adaptive Structures and Technologies (ICAST 2009)

NASA Astrophysics Data System (ADS)

Liao, Wei-Hsin

2010-12-01

The 20th International Conference on Adaptive Structures and Technologies (ICAST) was held on 20-22 October 2009 in Hong Kong. This special section of Smart Materials and Structures is derived from the research papers presented at the conference. Of the 106 papers presented at the conference, 11 papers were reviewed and accepted for this special section, following the regular review procedures of the journal. This special section is focused on smart materials, multifunctional composites, and applications on morphing structures. Smart materials. Smart materials are the foundation of adaptive structures and intelligent systems. The development of new materials will lead to significant improvement in various applications. Three articles are focused on the fabrication of new materials and investigation of their behaviors: Barium strontium zirconate titanate ((Ba1-xSrx)(ZrxTi1-x)O3; BSZT, x = 0.25 and 0.75) ceramics with a highly crystalline structure were fabricated using the combustion technique. The microstructure of BSZT powders exhibited an almost-spherical morphology and had a porous agglomerated form. Polyaniline (PANI)/clay nanoparticles with unique core-shell structure were synthesized via Pickering emulsion polymerization. By dispersing PANI/clay nanoparticles in silicone oil, the ER fluid was made. Magnetic field effects were investigated on the deposition rate and surface morphology of chromium nitride coatings deposited by magnetron sputtering for superior hardness, excellent wear and oxidation resistance. The surface morphology of chromium nitride films was also examined by a scanning electron microscope (SEM). Multifunctional composites. Composites are made from two or more constituent materials so they can combine the best properties of different materials. Five papers deal with fabrication, testing, and modeling of various multifunctional composites: A new active structural fiber (ASF) was fabricated by coating a single carbon fiber with a concentric PZT (PbZr0.52Ti0.48O3) shell using electrolytic deposition. This new ASF is expected to have broader applications due to the higher piezoelectric coupling effect with the use of carbon fiber and PZT. The sol-gel technique was employed to deposit lead zirconium titanium (PZT) and silica composite film onto a copper (Cu)/polyimide (PI) flexible structure. The fabricated PZT-silica composite films were then used for flexible actuator and sensor applications. Interfacial properties and hydrophobicity of multifunctional Ni-nanopowder/epoxy composites were evaluated for self-sensing and actuation. The effects of water content on the actuation performance of ionic polymer-metal composites (IPMCs) were investigated experimentally. Multiscale modelling of a composite electroactive polymer structure was developed, in particular for tubular actuators. The models were validated with experimental data. Morphing structures. Three papers relate to morphing skins and structures. Several issues including stiffness and energy consumption were explored: Composite corrugated structures were used as morphing skin panels (MSPs) in the trailing edge region of a scaled morphing aerofoil section. Wind tunnel testing was carried out to demonstrate the MSP concept. Optimization of a variable-stiffness skin was performed for morphing high-lift devices. The objective is to design the structure to have high enough stiffness to withstand aerodynamic loading and yet low enough stiffness to enable morphing. The aerodynamic and actuation loads were taken into consideration during the optimization. Two adaptive and morphing structures were proposed for low-energy consumption or even energy-harvesting green buildings with the use of an optimization process. Searching for optimal solutions was done by means of an evolutionary technique while the compatibility of the resulting configurations of the adaptive envelope was ensured by the virtual force density method. We would like to thank all of the authors for their significant contributions to this special section for Smart Materials and Structures. We are also grateful to all of the reviewers and associate editors who handled the reviews for their time and effort. I would like to express my sincere appreciation to Professor E Garcia, Editor-in-Chief, for his encouragement by providing the opportunity to make this special section. I am indebted to IOP Publishing for their strong support and the staff, in particular publisher Natasha Leeper, for their special attention and excellent service.

A quantitative damage imaging technique based on enhanced CCRTM for composite plates using 2D scan

NASA Astrophysics Data System (ADS)

He, Jiaze; Yuan, Fuh-Gwo

2016-10-01

A two-dimensional (2D) non-contact areal scan system was developed to image and quantify impact damage in a composite plate using an enhanced zero-lag cross-correlation reverse-time migration (E-CCRTM) technique. The system comprises a single piezoelectric wafer mounted on the composite plate and a laser Doppler vibrometer (LDV) for scanning a region in the vicinity of the PZT to capture the scattered wavefield. The proposed damage imaging technique takes into account the amplitude, phase, geometric spreading, and all of the frequency content of the Lamb waves propagating in the plate; thus, a reflectivity coefficients of the delamination is calculated and potentially related to damage severity. Comparisons are made in terms of damage imaging quality between 2D areal scans and 1D line scans as well as between the proposed and existing imaging conditions. The experimental results show that the 2D E-CCRTM performs robustly when imaging and quantifying impact damage in large-scale composites using a single PZT actuator with a nearby areal scan using LDV.

Multi-photon vertical cross-sectional imaging with a dynamically-balanced thin-film PZT z-axis microactuator.

PubMed

Choi, Jongsoo; Duan, Xiyu; Li, Haijun; Wang, Thomas D; Oldham, Kenn R

2017-10-01

Use of a thin-film piezoelectric microactuator for axial scanning during multi-photon vertical cross-sectional imaging is described. The actuator uses thin-film lead-zirconate-titanate (PZT) to generate upward displacement of a central mirror platform, micro-machined from a silicon-on-insulator (SOI) wafer to dimensions compatible with endoscopic imaging instruments. Device modeling in this paper focuses on existence of frequencies near device resonance producing vertical motion with minimal off-axis tilt even in the presence of multiple vibration modes and non-uniformity in fabrication outcomes. Operation near rear resonance permits large stroke lengths at low voltages relative to other vertical microactuators. Highly uniform vertical motion of the mirror platform is a key requirement for vertical cross-sectional imaging in the remote scan architecture being used for multi-photon instrument prototyping. The stage is installed in a benchtop testbed in combination with an electrostatic mirror that performs in-plane scanning. Vertical sectional images are acquired from 15 μm diameter beads and excised mouse colon tissue.

Large piezoelectric strain with ultra-low strain hysteresis in highly c-axis oriented Pb(Zr0.52Ti0.48)O3 films with columnar growth on amorphous glass substrates.

PubMed

Nguyen, Minh D; Houwman, Evert P; Rijnders, Guus

2017-10-10

Thin films of PbZr 0 . 52 Ti 0 . 48 O 3 (PZT) with largely detached columnar grains, deposited by pulsed laser deposition (PLD) on amorphous glass substrates covered with Ca 2 Nb 3 O 10 nanosheets as growth template and using LaNiO 3 electrode layers, are shown to exhibit very high unipolar piezoelectric strain and ultra-low strain hysteresis. The observed increase of the piezoelectric coefficient with increasing film thickness is attributed to the reduction of clamping, because of the increasingly less dense columnar microstructure (more separation between the grains) with across the film thickness. A very large piezoelectric coefficient (490 pm/V) and a high piezoelectric strain (~0.9%) are obtained in 4-µm-thick film under an applied electric field of 200 kV/cm, which is several times larger than in usual PZT ceramics. Further very low strain hysteresis (H≈2-4%) is observed in 4 to 5 µm thick films. These belong to the best values demonstrated so far in piezoelectric films. Fatigue testing shows that the piezoelectric properties are stable up to 10 10 cycles. The growth of high quality PZT films with very large strain and piezoelectric coefficients, very low hysteresis and with long-term stability on a technologically important substrate as glass is of great significance for the development of practical piezo driven microelectromechanical actuator systems.

A micropower miniature piezoelectric actuator for implantable middle ear hearing device.

PubMed

Wang, Zhigang; Mills, Robert; Luo, Hongyan; Zheng, Xiaolin; Hou, Wensheng; Wang, Lijun; Brown, Stuart I; Cuschieri, Alfred

2011-02-01

This paper describes the design and development of a small actuator using a miniature piezoelectric stack and a flextensional mechanical amplification structure for an implantable middle ear hearing device (IMEHD). A finite-element method was used in the actuator design. Actuator vibration displacement was measured using a laser vibrometer. Preliminary evaluation of the actuator for an IMEHD was conducted using a temporal bone model. Initial results from one temporal bone study indicated that the actuator was small enough to be implanted within the middle ear cavity, and sufficient stapes displacement can be generated for patients with mild to moderate hearing losses, especially at higher frequency range, by the actuator suspended onto the stapes. There was an insignificant mass-loading effect on normal sound transmission (<3 dB) when the actuator was attached to the stapes and switched off. Improved vibration performance is predicted by more firm attachment. The actuator power consumption and its generated equivalent sound pressure level are also discussed. In conclusion, the actuator has advantages of small size, lightweight, and micropower consumption for potential use as IMHEDs.

Design of a High Resolution Hexapod Positioning Mechanism

NASA Technical Reports Server (NTRS)

Britt, Jamie

2001-01-01

This paper describes the development of a high resolution, six-degree of freedom positioning mechanism. This mechanism, based on the Stewart platform concept, was designed for use with the Developmental Comparative Active Optics Telescope Testbed (DCATT), a ground-based technology testbed for the Next Generation Space Telescope (NGST). The mechanism provides active control to the DCATT telescope's segmented primary mirror. Emphasis is on design decisions and technical challenges. Significant issues include undesirable motion properties of PZT-inchworm actuators, testing difficulties, dimensional stability, and use of advanced composite materials. Supporting test data from prototype mechanisms is presented.

Design of a High Resolution Hexapod Positioning Mechanism

NASA Technical Reports Server (NTRS)

Britt, Jamie; Brodeur, Stephen J. (Technical Monitor)

2001-01-01

This paper describes the development of a high resolution, six-degree of freedom positioning mechanism. This mechanism, based on the Stewart platform concept, was designed for use with the Developmental Comparative Active Optics Telescope Testbed (DCATT), a ground-based technology testbed for the Next Generation Space Telescope (NGST). The mechanism provides active control to the DCATT telescope's segmented primary mirror. Emphasis is on design decisions and technical challenges. Significant issues include undesirable motion properties of PZT-inchworm actuators, testing difficulties, dimensional stability and use of advanced composite materials. Supporting test data from prototype mechanisms is presented.

Dynamic response of a piezoelectric flapping wing

NASA Astrophysics Data System (ADS)

Kumar, Alok; Khandwekar, Gaurang; Venkatesh, S.; Mahapatra, D. R.; Dutta, S.

2015-03-01

Piezo-composite membranes have advantages over motorized flapping where frequencies are high and certain coupling between bending and twisting is useful to generate lift and forward flight. We draw examples of fruit fly and bumble bee. Wings with Piezo ceramic PZT coating are realized. The passive mechanical response of the wing is characterized experimentally and validated using finite element simulation. Piezoelectric actuation with uniform electrode coating is characterized and optimal frequencies for flapping are identified. The experimental data are used in an empirical model and advanced ratio for a flapping insect like condition for various angular orientations is estimated.

Actuation Using Piezoelectric Materials: Application in Augmenters, Energy Harvesters, and Motors

NASA Technical Reports Server (NTRS)

Hasenoehrl, Jennifer

2012-01-01

Piezoelectric actuators are used in many manipulation, movement, and mobility applications as well as transducers and sensors. When used at the resonance frequencies of the piezoelectric stack, the actuator performs at its maximum actuation capability. In this Space Grant internship, three applications of piezoelectric actuators were investigated including hammering augmenters of rotary drills, energy harvesters, and piezo-motors. The augmenter shows improved drill performance over rotation only. The energy harvesters rely on moving fluid to convert mechanical energy into electrical power. Specific designs allow the harvesters more freedom to move, which creates more power. The motor uses the linear movement of the actuator with a horn applied to the side of a rotor to create rotational motion. Friction inhibits this motion and is to be minimized for best performance. Tests and measurements were made during this internship to determine the requirements for optimal performance of the studied mechanisms and devices.

Polymer-based actuators for virtual reality devices

NASA Astrophysics Data System (ADS)

Bolzmacher, Christian; Hafez, Moustapha; Benali Khoudja, Mohamed; Bernardoni, Paul; Dubowsky, Steven

2004-07-01

Virtual Reality (VR) is gaining more importance in our society. For many years, VR has been limited to the entertainment applications. Today, practical applications such as training and prototyping find a promising future in VR. Therefore there is an increasing demand for low-cost, lightweight haptic devices in virtual reality (VR) environment. Electroactive polymers seem to be a potential actuation technology that could satisfy these requirements. Dielectric polymers developed the past few years have shown large displacements (more than 300%). This feature makes them quite interesting for integration in haptic devices due to their muscle-like behaviour. Polymer actuators are flexible and lightweight as compared to traditional actuators. Using stacks with several layers of elatomeric film increase the force without limiting the output displacement. The paper discusses some design methods for a linear dielectric polymer actuator for VR devices. Experimental results of the actuator performance is presented.

Monolithic Flexure Pre-Stressed Ultrasonic Horns

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Bao, Xiaoqi; Badescu, Mircea; Bar-Cohen, Yoseph; Allen, Phillip Grant

2011-01-01

High-power ultrasonic actuators are generally assembled with a horn, backing, stress bolt, piezoelectric rings, and electrodes. The manufacturing process is complex, expensive, difficult, and time-consuming. The internal stress bolt needs to be insulated and presents a potential internal discharge point, which can decrease actuator life. Also, the introduction of a center hole for the bolt causes many failures, reducing the throughput of the manufactured actuators. A new design has been developed for producing ultrasonic horn actuators. This design consists of using flexures rather than stress bolts, allowing one to apply pre-load to the piezoelectric material. It also allows one to manufacture them from a single material/plate, rapid prototype them, or make an array in a plate or 3D structure. The actuator is easily assembled, and application of pre-stress greater than 25 MPa was demonstrated. The horn consists of external flexures that eliminate the need for the conventional stress bolt internal to the piezoelectric, and reduces the related complexity. The stress bolts are required in existing horns to provide prestress on piezoelectric stacks when driven at high power levels. In addition, the manufacturing process benefits from the amenability to produce horn structures with internal cavities. The removal of the pre-stress bolt removes a potential internal electric discharge point in the actuator. In addition, it significantly reduces the chances of mechanical failure in the piezoelectric stacks that result from the hole surface in conventional piezoelectric actuators. The novel features of this disclosure are: 1. A design that can be manufactured from a single piece of metal using EDM, precision machining, or rapid prototyping. 2. Increased electromechanical coupling of the horn actuator. 3. Higher energy density. 4. A monolithic structure of a horn that consists of an external flexure or flexures that can be used to pre-stress a solid piezoelectric structure rather than a bolt, which requires a through hole in the piezoelectric material. 5. A flexure system with low stiffness that accommodates mechanical creep with minor reduction in pre-stress.

Refreshable tactile displays based on bistable electroactive polymer

NASA Astrophysics Data System (ADS)

Niu, Xiaofan; Brochu, Paul; Salazar, Brandon; Pei, Qibing

2011-04-01

Refreshable tactile displays can significantly improve the education of blind children and the quality of life of people with severe vision impairment. A number of actuator technologies have been investigated. Bistable Electroactive Polymer (BSEP) appears to be well suited for this application. The BSEP exhibits a bistable electrically actuated strain as large as 335%. We present improved refreshable tactile display devices fabricated on thin plastic sheets. Stacked BSEP films were employed to meet the requirements in raised dot height and supporting force. The bistable nature of the actuation reduces the power consumption and simplifies the device operation.

Actuating mechanism and design of a cylindrical traveling wave ultrasonic motor using cantilever type composite transducer.

PubMed

Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

2010-04-02

Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor.

Contractive tension force stack actuator based on soft dielectric EAP

NASA Astrophysics Data System (ADS)

Kovacs, Gabor; Düring, Lukas

2009-03-01

Among the electronic polymers EAPs especially the dielectric elastomers are functional materials that have promising potential as muscle-like actuators due to their inherent compliancy and good overall performance. The combination of huge active deformations, high energy densities, good efficiencies and fast response is unique to dielectric elastomers. Furthermore, they are lightweight, have a simple structure and can be easily tailored to various applications. Up to now most scientific research work has been focused on the planar expanding actuation mode due to the fact that the commercially available acrylic material VHB 4910 (3M) can easily be processed to planar actuators and has demonstrated very high actuation performance when pre-strained. Many different actuator designs have been developed and tested which expands in plane when voltage is applied and shrinks back as soon as the applied charges are removed from the electrodes. Obviously the contractive operation mode at activation is required for a wide range of application. Due to the principle of operation of soft DE EAP, mainly two directions to performed work against external loads are possible. Beside of the commonly used expanding actuation in planar direction the contractile actuation in thickness direction of the DE film represents a very promising option in the multilayer configuration. First approaches have been presented by the folded actuator design and by the multilayer tactile display device. In this study a novel approach for active structures driven by soft dielectric EAP is presented, which can perform contractive displacements at external tensile load. The device is composed of an array of equal segments, where the dielectric films are arranged in a pile-up configuration. In order to maintain satisfying structural integrity when external tension load is applied special attention was paid to the compliant electrode design which takes a central importance concerning the force transmission capability between each layer of the actuator. Due to the stack configuration of the actuator the commonly used and pre-strained acrylic film was replaced by the stress-free IPN modified acrylic film in order to eliminate the need for external pre-strain-supporting structures. Introductorily, the specific problems on conventional expanding actuators are discussed and the aims for contractive tension force actuators are specified. Then some structural design parameters are addressed in order to achieve a high rate of yield and reliable working principle. In the main part of the study the manufacturing process of the actuators and some measurement results and experiences are discussed in detail.

Interfacial charge-induced polarization switching in Al{sub 2}O{sub 3}/Pb(Zr,Ti)O{sub 3} bi-layer

DOE Office of Scientific and Technical Information (OSTI.GOV)

Kim, Yu Jin; Park, Min Hyuk; Jeon, Woojin

2015-12-14

Detailed polarization switching behavior of an Al{sub 2}O{sub 3}/Pb(Zr,Ti)O{sub 3} (AO/PZT) structure is examined by comparing the phenomenological thermodynamic model to the experimental polarization–voltage (P-V) results. Amorphous AO films with various thicknesses (2–10 nm) were deposited on the polycrystalline 150-nm-thick PZT film. The thermodynamic calculation showed that the transition from the ferroelectric-like state to the paraelectric-like state with increasing AO thickness occurs at ∼3 nm thickness. This paraelectric-like state should have exhibited a negative capacitance effect without permanent polarization switching if no other adverse effects are involved. However, experiments showed typical ferroelectric-like hysteresis loops where the coercive voltage increased with the increasingmore » AO thickness, which could be explained by the carrier injection through the thin AO layer and trapping of the carriers at the AO/PZT interface. The fitting of the experimental P-V loops using the thermodynamic model considering the depolarization energy effect showed that trapped charge density was ∼±0.1 Cm{sup −2} and critical electric field at the Pt electrode/AO interface, at which the carrier transport occurs, was ∼±10 MV/cm irrespective of the AO thickness. Energy band model at each electrostatic state along the P-V loop was provided to elucidate correlation between macroscopic polarization and internal charge state of the stacked films.« less

Development of a magneto-rheological fluid based hybrid actuation system

NASA Astrophysics Data System (ADS)

John, Shaju

A hybrid hydraulic actuation system is proposed as an active pitch link for rotorcraft applications. Such an active pitch link can be used to implement Individual Blade Control (IBC) techniques for vibration and noise reduction, in addition to providing primary control for the helicopter. Conventional technologies like electric motors and hydraulic actuators have major disadvantages when it come to applications on a rotating environment. Centralized hydraulic system require the use of mechanically complex hydraulic slip rings and electric motors have high precision mechanical moving parts that make them unattractive in application with high centrifugal load. The high energy density of smart materials can be used to design hydraulic actuators in a compact package. MagnetoRheological (MR) fluids can be used as the working fluid in such a hybrid hydraulic actuation system to implement a valving system with no moving parts. Thus, such an actuation system can be theoretically well-suited for application in a rotating environment. To develop an actuation system based on an active material stack and MR fluidic valves, a fundamental understanding of the hydraulic circuit is essential. In order to address this issue, a theoretical model was developed to understand the effect of pumping chamber geometry on the pressure losses in the pumping chamber. Three dimensional analytical models were developed for steady and unsteady flow and the results were correlated to results obtained from Computation Fluid Dynamic simulation of fluid flow inside the pumping chamber. Fundamental understanding regarding the pressure losses in a pumping chamber are obtained from the modeling process. Vortices that form in the pumping chamber (during intake) and the discharge tube (during discharge) are identified as a major cause of pressure loss in the chamber. The role of vortices during dynamic operation is also captured through a frequency domain model. Extensive experimental studies were conducted on a hybrid hydraulic system driven by a pump (actuated by a 2" long and 1/4" diameter Terfenol-D rod) and a Wheatstone bridge network of MR fluidic valves. The Wheatstone bridge network is used to provide bi-directionality to the load. Through a variety of experimental studies, the main performance metrics of the actuation system, like output power, blocked force, maximum no-load velocity and efficiency, are obtained. The actuation system exhibits a blocked force of 30 N and a maximum no-load velocity of 50 mm/s. Extensive bi-directional tests were also done for cases of no-load, inertial load and spring load to establish the frequency bandwidth of the actuator. The actuation system can output a stroke of 9 mm at an output actuator frequency of 4 Hz. An analytical model was developed to predict the performance of the hybrid hydraulic actuation system. A state space representation of the system was derived using equations derived from the control volume considerations. The results of the analytical model show that the model predicts the frequency peak of the system to within 20 Hz of the actual resonance frequency. In the third part of this dissertation, the effectiveness of the hybrid hydraulic actuation system is evaluated in a rotating environment. A piezoelectric stack that is driven by three PI-804.10 stacks was attached at the end of a spin bar. After balancing the spin bar using a counterweight, the spin bar is spun to an RPM of 300. This simulates a centrifugal loading of 400 g, which is slightly higher than the full-scale centrifugal loads experienced by a pitch link on a UH-60. The performance of the actuator was measured in terms of velocity of an output cylinder shaft. Since some deterioration of performance was expected at 300 RPM, the output cylinder was redesigned to include roller bearings to support the excess force. Through no load and load tests, the effectiveness of the current hybrid actuation system design was shown as the performance of the system did not deteriorate in performance with greater centrifugal acceleration.

Locomotion response of airborne, ambulatory and aquatic insects to thermal stimulation using piezoceramic microheaters

NASA Astrophysics Data System (ADS)

Visvanathan, Karthik; Gianchandani, Yogesh B.

2011-12-01

This paper reports the locomotion response of airborne, ambulatory and aquatic insects to thermal stimulation. A finite element model has been developed to predict the variation of insect-stimulator interface temperature with input power. Piezothermal stimulators have been fabricated from lead zirconate titanate (PZT) using a batch mode micro ultrasonic machining process. Typical sizes range from 200 µm to 3.2 mm. For PZT stimulators, the temperature and thermal efficiency reach the maximum value around the resonance frequency which is typically in the range of 650 kHz to 47 MHz. Experiments have been conducted on green June beetles (GJBs), Madagascar hissing roaches and green diving beetles (GDBs) in order to show the versatility of the proposed technique. The stimulators have been implanted near the antennae of the GJBs and on either side of the thorax of the Madagascar hissing roaches and GDBs, respectively. In all cases, the insects move away from the direction of the actuated stimulator. The left and right turns are statistically similar. Thermal stimulation achieves an overall success rate of 78.7%, 92.8% and 61.6% in GJBs, roaches and GDBs, respectively. On average, thermal stimulation results in an angle turn of about 13.7°-16.2° on GJBs, 30°-45° on the roaches and 30°-50° on GDBs. The corresponding average input power is 360, 330 and 100 mW for GJBs, roach and GDBs, respectively. Scaling limits of the PZT stimulators for operating these stimulators are also discussed.

Monitoring of Pre-Load on Rock Bolt Using Piezoceramic-Transducer Enabled Time Reversal Method.

PubMed

Huo, Linsheng; Wang, Bo; Chen, Dongdong; Song, Gangbing

2017-10-27

Rock bolts ensure structural stability for tunnels and many other underground structures. The pre-load on a rock bolt plays an important role in the structural reinforcement and it is vital to monitor the pre-load status of rock bolts. In this paper, a rock bolt pre-load monitoring method based on the piezoceramic enabled time reversal method is proposed. A lead zirconate titanate (PZT) patch transducer, which works as an actuator to generate stress waves, is bonded onto the anchor plate of the rock bolt. A smart washer, which is fabricated by sandwiching a PZT patch between two metal rings, is installed between the hex nut and the anchor plate along the rock bolt. The smart washer functions as a sensor to detect the stress wave. With the increase of the pre-load values on the rock bolt, the effective contact surface area between the smart washer and the anchor plate, benefiting the stress wave propagation crossing the contact surface. With the help of time reversal technique, experimental results reveal that the magnitude of focused signal clearly increases with the increase of the pre-load on a rock bolt before the saturation which happens beyond a relatively high value of the pre-load. The proposed method provides an innovative and real time means to monitor the pre-load level of a rock bolt. By employing this method, the pre-load degradation process on a rock bolt can be clearly monitored. Please note that, currently, the proposed method applies to only new rock bolts, on which it is possible to install the PZT smart washer.

Design, Fabrication, and Modeling of a Novel Dual-Axis Control Input PZT Gyroscope.

PubMed

Chang, Cheng-Yang; Chen, Tsung-Lin

2017-10-31

Conventional gyroscopes are equipped with a single-axis control input, limiting their performance. Although researchers have proposed control algorithms with dual-axis control inputs to improve gyroscope performance, most have verified the control algorithms through numerical simulations because they lacked practical devices with dual-axis control inputs. The aim of this study was to design a piezoelectric gyroscope equipped with a dual-axis control input so that researchers may experimentally verify those control algorithms in future. Designing a piezoelectric gyroscope with a dual-axis control input is more difficult than designing a conventional gyroscope because the control input must be effective over a broad frequency range to compensate for imperfections, and the multiple mode shapes in flexural deformations complicate the relation between flexural deformation and the proof mass position. This study solved these problems by using a lead zirconate titanate (PZT) material, introducing additional electrodes for shielding, developing an optimal electrode pattern, and performing calibrations of undesired couplings. The results indicated that the fabricated device could be operated at 5.5±1 kHz to perform dual-axis actuations and position measurements. The calibration of the fabricated device was completed by system identifications of a new dynamic model including gyroscopic motions, electromechanical coupling, mechanical coupling, electrostatic coupling, and capacitive output impedance. Finally, without the assistance of control algorithms, the "open loop sensitivity" of the fabricated gyroscope was 1.82 μV/deg/s with a nonlinearity of 9.5% full-scale output. This sensitivity is comparable with those of other PZT gyroscopes with single-axis control inputs.

Load monitoring using a calibrated piezo diaphragm based impedance strain sensor and wireless sensor network in real time

NASA Astrophysics Data System (ADS)

Gopal Madhav Annamdas, Venu; Kiong Soh, Chee

2017-04-01

The last decade has seen the use of various wired-wireless and contact-contactless sensors in several structural health monitoring (SHM) techniques. Most SHM sensors that are predominantly used for strain measurements may be ineffective for damage detection and vice versa, indicating the uniapplicability of these sensors. However, piezoelectric (PE)-based macro fiber composite (MFC) and lead zirconium titanate (PZT) sensors have been on the rise in SHM, vibration and damping control, etc, due to their superior actuation and sensing abilities. These PE sensors have created much interest for their multi-applicability in various technologies such as electromechanical impedance (EMI)-based SHM. This research employs piezo diaphragms, a cheaper alternative to several expensive types of PZT/MFC sensors for the EMI technique. These piezo diaphragms were validated last year for their applicability in damage detection using the frequency domain. Here we further validate their applicability in strain monitoring using the real time domain. Hence, these piezo diaphragms can now be classified as PE sensors and used with PZT and MFC sensors in the EMI technique for monitoring damage and loading. However, no single technique or single type of sensor will be sufficient for large SHM, thus requiring the necessary deployment of more than one technique with different types of sensors such as a piezoresistive strain gauge based wireless sensor network for strain measurements to complement the EMI technique. Furthermore, we present a novel procedure of converting a regular PE sensor in the ‘frequency domain’ to ‘real time domain’ for strain applications.

Evaluation of peak-free electromechanical piezo-impedance and electromagnetic contact sensing using metamaterial surface plasmons for load monitoring

NASA Astrophysics Data System (ADS)

Gopal Madhav Annamdas, Venu; Kiong Soh, Chee

2017-01-01

Continuous structural health monitoring (SHM) and delayed SHM techniques can be contact/ contactless, surface bonded/embedded, wired/wireless and active/passive actuator-sensor systems which transfer the recorded condition of the structure to the base station almost instantaneously or with time delay respectively. The time between fatal crack initiation and its propagation leading to the collapse of key infrastructures such as aerospace, nuclear facilities, oil and gas is mostly short. Timely discovery of structural problem depends heavily on the scanning period in well-established techniques like piezoelectric (PZT) based electromechanical impedance (EMI) technique. This often takes much scanning time due to the acquisition of resonant structural peaks at all frequencies in the considered bandwidth; thus poses a challenge for its implementation in practice. On the other hand, recently developed strain sensors based on metamaterials and their breeds such as nested split-ring resonators, localized surface plasmons (LSP), etc, employ measurement of reflected or transmitted signal, with super-fast scanning in the order of at most 1/100th of the time taken by the EMI technique. This paper articulates faster measurements by reducing unnecessary resonant structural peaks and focusing on rapid monitoring using PZT and metamaterial plasmons. Our research adopted wired PZT and wireless LSP communications with impedance analyser and vector network analyser respectively. We present integrated and complementary nature of these techniques, which can be processed rapidly for key infrastructures with great effectiveness. This integration can result in both continuous and delayed SHM techniques based on time or frequency or both domains.

Contour mode resonators with acoustic reflectors

DOEpatents

Olsson, Roy H [Albuquerque, NM; Fleming, James G [Albuquerque, NM; Tuck, Melanie R [Albuquerque, NM

2008-06-10

A microelectromechanical (MEM) resonator is disclosed which has a linear or ring-shaped acoustic resonator suspended above a substrate by an acoustic reflector. The acoustic resonator can be formed with a piezoelectric material (e.g. aluminum nitride, zinc oxide or PZT), or using an electrostatically-actuated material. The acoustic reflector (also termed an acoustic mirror) uses alternating sections of a relatively low acoustic impedance Z.sub.L material and a relatively high acoustic impedance Z.sub.H material to isolate the acoustic resonator from the substrate. The MEM resonator, which can be formed on a silicon substrate with conventional CMOS circuitry, has applications for forming oscillators, rf filters, and acoustic sensors.

PZT thin film actuated elastic fin micromotor.

PubMed

Dubois, M A; Muralt, P

1998-01-01

A piezoelectric elastic fin micromotor based on a PbZr(0.53 )Ti(0.47)O(3) thin film driving a micromachined silicon membrane was fabricated and studied. The stator was characterized by interferometry, and a laser set-up was used to measure the angular velocity and acceleration of the motor. The torque, the output power, and the efficiency of the device were extracted from these measurements. Values up to 1020 rpm and 0.94 microNm were observed for the velocity and the torque, respectively, which would be sufficient for a wristwatch application. The present version exhibited an efficiency of 0.17%, which could theoretically be increased to 4.8%

Temperature effects in ultrasonic Lamb wave structural health monitoring systems.

PubMed

Lanza di Scalea, Francesco; Salamone, Salvatore

2008-07-01

There is a need to better understand the effect of temperature changes on the response of ultrasonic guided-wave pitch-catch systems used for structural health monitoring. A model is proposed to account for all relevant temperature-dependent parameters of a pitch-catch system on an isotropic plate, including the actuator-plate and plate-sensor interactions through shear-lag behavior, the piezoelectric and dielectric permittivity properties of the transducers, and the Lamb wave dispersion properties of the substrate plate. The model is used to predict the S(0) and A(0) response spectra in aluminum plates for the temperature range of -40-+60 degrees C, which accounts for normal aircraft operations. The transducers examined are monolithic PZT-5A [PZT denotes Pb(Zr-Ti)O3] patches and flexible macrofiber composite type P1 patches. The study shows substantial changes in Lamb wave amplitude response caused solely by temperature excursions. It is also shown that, for the transducers considered, the response amplitude changes follow two opposite trends below and above ambient temperature (20 degrees C), respectively. These results can provide a basis for the compensation of temperature effects in guided-wave damage detection systems.

Apparatus and method for variable angle slant hole collimator

DOEpatents

Lee, Seung Joon; Kross, Brian J.; McKisson, John E.

2017-07-18

A variable angle slant hole (VASH) collimator for providing collimation of high energy photons such as gamma rays during radiological imaging of humans. The VASH collimator includes a stack of multiple collimator leaves and a means of quickly aligning each leaf to provide various projection angles. Rather than rotate the detector around the subject, the VASH collimator enables the detector to remain stationary while the projection angle of the collimator is varied for tomographic acquisition. High collimator efficiency is achieved by maintaining the leaves in accurate alignment through the various projection angles. Individual leaves include unique angled cuts to maintain a precise target collimation angle. Matching wedge blocks driven by two actuators with twin-lead screws accurately position each leaf in the stack resulting in the precise target collimation angle. A computer interface with the actuators enables precise control of the projection angle of the collimator.

Control of helicopter rotorblade aerodynamics

NASA Technical Reports Server (NTRS)

Fabunmi, James A.

1991-01-01

The results of a feasibility study of a method for controlling the aerodynamics of helicopter rotorblades using stacks of piezoelectric ceramic plates are presented. A resonant mechanism is proposed for the amplification of the displacements produced by the stack. This motion is then converted into linear displacement for the actuation of the servoflap of the blades. A design which emulates the actuation of the servoflap on the Kaman SH-2F is used to demonstrate the fact that such a system can be designed to produce the necessary forces and velocities needed to control the aerodynamics of the rotorblades of such a helicopter. Estimates of the electrical power requirements are also presented. A Small Business Innovation Research (SBIR) Phase 2 Program is suggested, whereby a bench-top prototype of the device can be built and tested. A collaborative effort between AEDAR Corporation and Kaman Aerospace Corporation is anticipated for future effort on this project.

Miniature Low-Mass Drill Actuated by Flextensional Piezo Stack

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Badescu, Mircea; Bar-Cohen, Yoseph

2010-01-01

Recent experiments with a flextensional piezoelectric actuator have led to the development of a sampler with a bit that is designed to produce and capture a full set of sample forms including volatiles, powdered cuttings, and core fragments. The flextensional piezoelectric actuator is a part of a series of devices used to amplify the generated strain from piezoelectric actuators. Other examples include stacks, bimorphs, benders, and cantilevers. These devices combine geometric and resonance amplifications to produce large stroke at high power density. The operation of this sampler/drill was demonstrated using a 3x2x1-cm actuator weighing 12 g using power of about 10-W and a preload of about 10 N. A limestone block was drilled to a depth of about 1 cm in five minutes to produce powdered cuttings. It is generally hard to collect volatiles from random surface profiles found in rocks and sediment, powdered cuttings, and core fragments. Toward the end of collecting volatiles, the actuator and the bit are covered with bellows-shaped shrouds to prevent fines and other debris from reaching the analyzer. A tube with a miniature bellows (to provide flexibility) is connected to the bit and directs the flow of the volatiles to the analyzer. Another modality was conceived where the hose is connected to the bellows wall directly to allow the capture of volatiles generated both inside and outside the bit. A wide variety of commercial bellows used in the vacuum and microwave industries can be used to design the volatiles capture mechanism. The piezoelectric drilling mechanism can potentially be operated in a broad temperature range from about-200 to less than 450 C. The actuators used here are similar to the actuators that are currently baselined to fly as part of the inlet funnel shaking mechanism design of MSL (Mars Science Laboratory). The space qualification of these parts gives this drill a higher potential for inclusion in a future mission, especially when considering its characteristics of low mass, small size, low power, and low axial loads for sampling.

Comparison of Piezo-material based Energy Transduction Systems for Artificial Nanoswimmer

NASA Astrophysics Data System (ADS)

Nain, S.; Rathore, J. S.; Sharma, N. N.

2018-04-01

The energy harnessing is a process of obtaining energy from the surrounding environment and converting into electrical energy. In the last two decades, there has been a plenteous study in energy harnessing. Now a day, energy harnessing using piezoelectric materials has drawn attention of researchers due to low cost, flexibility and light weight. The benefits of piezoelectric material can be utilized by designing a self-powered device for artificial nanoswimmer. Some of the ceramics which displays the piezoelectric effect are lead-zirconate-titanate (PZT), lead-titanate (PbTiO2), lead-zirconate (PbZrO3) and Barium Titanate (BaTiO3). PZT is most extensively used piezoelectric material in the field of energy harnessing but it is brittle in nature. Lead based piezoelectric materials are toxic in nature and may not suitable for in-vivo biomedical applications. To eradicate this problem, researchers are interested in synthesizing lead free piezoelectric material such as Aluminium Nitride (AIN), Barium Titanate (BaTiO3) and Polyvinylidenefluoride (PVDF). The biocompatibility of PVDF makes it appropriate to be used for energy harnessing in human body for applications like on board powering of nanoswimmer for various disease detection and drug delivery. In this paper, a cantilever beam is being simulated in COMSOL to study electric potential generated on the surface of beam made of different piezoelectric materials such as AIN, PVDF and PZT due to fluidic pressure, which will be utilized as energy for actuation of artificial nanoswimmer. Piezo-based cantilever beams have been compared and maximum electric potential is being observed in PVDF based beam. PVDF seems most promising piezoelectric material for in-vivo biomedical application and it is readily available.

The research progress of metrological 248nm deep ultraviolent microscope inspection device

NASA Astrophysics Data System (ADS)

Wang, Zhi-xin; Li, Qi; Gao, Si-tian; Shi, Yu-shu; Li, Wei; Li, Shi

2016-01-01

In lithography process, the precision of wafer pattern to a large extent depends on the geometric dimensioning and tolerance of photomasks when accuracy of lithography aligner is certain. Since the minimum linewidth (Critical Dimension) of the aligner exposing shrinks to a few tens of nanometers in size, one-tenth of tolerance errors in fabrication may lead to microchip function failure, so it is very important to calibrate these errors of photomasks. Among different error measurement instruments, deep ultraviolent (DUV) microscope because of its high resolution, as well as its advantages compared to scanning probe microscope restrained by measuring range and scanning electron microscope restrained by vacuum environment, makes itself the most suitable apparatus. But currently there is very few DUV microscope adopting 248nm optical system, means it can attain 80nm resolution; furthermore, there is almost no DUV microscope possessing traceable calibration capability. For these reason, the National Institute of Metrology, China is developing a metrological 248nm DUV microscope mainly consists of DUV microscopic components, PZT and air supporting stages as well as interferometer calibration framework. In DUV microscopic component, the Köhler high aperture transmit condenser, DUV splitting optical elements and PMT pinhole scanning elements are built. In PZT and air supporting stages, a novel PZT actuating flexural hinge stage nested separate X, Y direction kinematics and a friction wheel driving long range air supporting stage are researched. In interferometer framework, a heterodyne multi-pass interferometer measures XY axis translation and Z axis rotation through Zerodur mirror mounted on stage. It is expected the apparatus has the capability to calibrate one dimensional linewidths and two dimensional pitches ranging from 200nm to 50μm with expanded uncertainty below 20nm.

Understanding the quasi-static thermo-electro-mechanical response of piezoelectric materials

NASA Astrophysics Data System (ADS)

Ganley, Jeffrey Mark

2007-12-01

Piezoelectricity describes the behavior of a class of materials which exhibit a relationship between mechanical strain and electrical field. Piezoelectric materials can be crystals (e.g. quartz), ceramic (e.g. lead-zirconate-titanate---PZT---the primary focus of the present research), or polymers (e.g. polyvinylidine-fluoride - PVDF). Piezopolymers and piezoceramics offer a significant improvement in piezoelectric properties over naturally occurring piezoelectrics like quartz. In the last five years, research in piezoelectrics has begun to change focus from the more traditional sensor/actuator applications to utilizing piezoelectric materials in energy harvesting applications. The present research will explore the very low frequency response of piezoelectrics, including several energy harvesting applications, as well as the interactions between thermal, mechanical and electrical energy in a thermally driven piezoelectric energy generation system. In Chapter 1, the history of piezoelectric research and development is given, along with an overview of piezoelectricity for those readers who are not familiar with the topic. In Chapter 2, current investigations in piezoelectric energy harvesting research are summarized. The present research, namely understanding the quasi-static thermo-electro-mechanical response of piezoelectric materials is also summarized. In addition, two applications: thermal management in a satellite and energy harvesting from a vibrating highway bridge are detailed as motivators for the present research. Chapter 3 gives a summary of the relevant piezoelectric theory. In addition, electrical circuit theory and thermodynamic heat capacity/heat energy considerations required to complete the present research are given. Chapter 4 provides a summary of the experimental testing completed during the course of the present research. Significant testing, including determination of the PZT/Aluminum substrate sample time constants, thermal calibration testing and quantification of the voltage resulting from the PZT/Aluminum substrate samples, is detailed and summarized. In Chapter 5 the research analysis, including variance of the PZT element capacitance with loading condition, is presented. Novel piezoelectric theory associated with the thermally induced planar strain loading condition, along with corroborating test results, are also presented. Chapter 6 notes the significant results, conclusions and recommendations for future research resulting from the present research, including a system level summary of the 'satellite' and 'bridge' applications.

Initial Demonstration of Mercury Wavefront Correction System

DOE Office of Scientific and Technical Information (OSTI.GOV)

Liao, Z M

2006-02-01

High average power operation of the Mercury Laser induces dynamic aberrations to the laser beam wavefront. Analysis of recent data indicates that up to 4 waves of low order aberration (mainly focus error or power, with spatial resolution < 0.5 cm{sup -1}) could be expected at each pass. Because of the magnitude of the wavefront error, the logical position is to place a deformable mirror (DM) at the M11 position, where the DM will correct the beam between passes 1 & 2 and 3 & 4. Currently, there are only two established commercial vendors offering complete adaptive optic (AO) systemsmore » that can accommodate the Mercury beam size (45 x 75 mm) which are compatible with high damage threshold coatings. Xinetics (MA, USA) offers a complete AO system along with a Shack-Hartmann wavefront sensor. The Xinetics DM is based on lead magnesium niobate (PMN) technology. A number of US aerospace firms as well as NIF use Xinetics PMN technology for their DMs. Phasics (Paris, France) offers a complete AO solution with its proprietary SID-4, a four-way shearing interferometric wavefront sensor capable of high resolution (over 100 x 100 sampling points). The Phasics system includes a bimorph deformable mirror from Night-n-Opt (Moscow, Russia) that uses lead zirconate titanate (PZT) technology. Various high power laser laboratories around the world such as LULI (France), HELEN (UK), and GEKKO (Japan) are using the PZT-based bimorph DM in their system. While both DM technologies are equivalent and have been deployed in high-energy laser systems, the PZT based bimorph DM offers two distinct features that makes it more attractive for high average power laser systems. The bimorph DM uses two layers of PZT actuators with the outer layer acting as power correctors, capable of correcting up to 20 waves of power. The Xinetics DM offers a maximum stroke of 4 waves. In addition, Night-N-Opt has also designed a water-cooled DM with a silicon based substrate (as opposed to a glass substrate) specifically for high average power laser systems--an option that is currently not available for PMN based DMs.« less

Electric field responsive origami structures using electrostriction-based active materials

NASA Astrophysics Data System (ADS)

Ahmed, Saad; Arrojado, Erika; Sigamani, Nirmal; Ounaies, Zoubeida

2015-04-01

The objective of origami engineering is to combine origami principles with advanced materials to yield active origami shapes, which fold and unfold in response to external stimuli. We are investigating the use of P(VDF-TrFE-CTFE), a relaxor ferroelectric terpolymer, to realize origami-inspired folding and unfolding of structures and to actuate so-called action origami structures. To accomplish these two objectives, we have explored different approaches to the P(VDF-TrFECTFE) polymer actuator construction, ranging from unimorph to multilayered stacks. Electromechanical characterization of the terpolymer-based actuators is conducted with a focus on free strain, force-displacement and blocked force. Moreover dynamic thickness strains of P(VDF-TrFE-CTFE) terpolymer at different frequencies ranging from 0.1Hz to 10Hz is also measured. Quantifying the performance of terpolymer-based actuators is important to the design of action origami structures. Following these studies, action origami prototypes based on catapult, flapping butterfly wings and barking fox are actuated and characterization of these prototypes are conducted by studying impact of various parameters such as electric field magnitude and frequency, number of active layers, and actuator dimensions.

Plasma-Assisted Dry Etching of Ferroelectric Capacitor Modules and Application to a 32M Ferroelectric Random Access Memory Devices with Submicron Feature Sizes

NASA Astrophysics Data System (ADS)

Lee, Sang-Woo; Joo, Suk-Ho; Cho, Sung Lae; Son, Yoon-Ho; Lee, Kyu-Mann; Nam, Sang-Don; Park, Kun-Sang; Lee, Yong-Tak; Seo, Jung-Suk; Kim, Young-Dae; An, Hyeong-Geun; Kim, Hyoung-Joon; Jung, Yong-Ju; Heo, Jang-Eun; Lee, Moon-Sook; Park, Soon-Oh; Chung, U-In; Moon, Joo-Tae

2002-11-01

In the manufacturing of a 32M ferroelectric random access memory (FRAM) device on the basis of 0.25 design rule (D/R), one of the most difficult processes is to pattern a submicron capacitor module while retaining good ferroelectric properties. In this paper, we report the ferroelectric property of patterned submicron capacitor modules with a stack height of 380 nm, where the 100 nm-thick Pb(Zr, Ti)O3 (PZT) films were prepared by the sol-gel method. After patterning, overall sidewall slope was approximately 70° and cell-to-cell node separation was made to be 80 nm to prevent possible twin-bit failure in the device. Finally, several heat treatment conditions were investigated to retain the ferroelectric property of the patterned capacitor. It was found that rapid thermal processing (RTP) treatment yields better properties than conventional furnace annealing. This result is directly related to the near-surface chemistry of the PZT films, as confirmed by X-ray photoelectron spectroscopy (XPS) analysis. The resultant switching polarization value of the submicron capacitor was approximately 30 μC/cm2 measured at 3 V.

Experimental study of an adaptive CFRC reflector for high order wave-front error correction

NASA Astrophysics Data System (ADS)

Lan, Lan; Fang, Houfei; Wu, Ke; Jiang, Shuidong; Zhou, Yang

2018-03-01

The recent radio frequency communication system developments are generating the need for creating space antennas with lightweight and high precision. The carbon fiber reinforced composite (CFRC) materials have been used to manufacture the high precision reflector. The wave-front errors caused by fabrication and on-orbit distortion are inevitable. The adaptive CFRC reflector has received much attention to do the wave-front error correction. Due to uneven stress distribution that is introduced by actuation force and fabrication, the high order wave-front errors such as print-through error is found on the reflector surface. However, the adaptive CFRC reflector with PZT actuators basically has no control authority over the high order wave-front errors. A new design architecture assembled secondary ribs at the weak triangular surfaces is presented in this paper. The virtual experimental study of the new adaptive CFRC reflector has conducted. The controllability of the original adaptive CFRC reflector and the new adaptive CFRC reflector with secondary ribs are investigated. The virtual experimental investigation shows that the new adaptive CFRC reflector is feasible and efficient to diminish the high order wave-front error.

High precision tracking of a piezoelectric nano-manipulator with parameterized hysteresis compensation

NASA Astrophysics Data System (ADS)

Yan, Peng; Zhang, Yangming

2018-06-01

High performance scanning of nano-manipulators is widely deployed in various precision engineering applications such as SPM (scanning probe microscope), where trajectory tracking of sophisticated reference signals is an challenging control problem. The situation is further complicated when rate dependent hysteresis of the piezoelectric actuators and the stress-stiffening induced nonlinear stiffness of the flexure mechanism are considered. In this paper, a novel control framework is proposed to achieve high precision tracking of a piezoelectric nano-manipulator subjected to hysteresis and stiffness nonlinearities. An adaptive parameterized rate-dependent Prandtl-Ishlinskii model is constructed and the corresponding adaptive inverse model based online compensation is derived. Meanwhile a robust adaptive control architecture is further introduced to improve the tracking accuracy and robustness of the compensated system, where the parametric uncertainties of the nonlinear dynamics can be well eliminated by on-line estimations. Comparative experimental studies of the proposed control algorithm are conducted on a PZT actuated nano-manipulating stage, where hysteresis modeling accuracy and excellent tracking performance are demonstrated in real-time implementations, with significant improvement over existing results.

A-site- and/or B-site-modified PbZrTiO3 materials and (Pb, Sr, Ca, Ba, Mg) (Zr, Ti, Nb, Ta)O3 films having utility in ferroelectric random access memories and high performance thin film microactuators

NASA Technical Reports Server (NTRS)

Bilodeau, Steven (Inventor); Baum, Thomas H. (Inventor); Roeder, Jeffrey F. (Inventor); Chen, Ing-Shin (Inventor)

2001-01-01

A modified PbZrTiO.sub.3 perovskite crystal material thin film, wherein the PbZrTiO.sub.3 perovskite crystal material includes crystal lattice A-sites and B-sites at least one of which is modified by the presence of a substituent selected from the group consisting of (i) A-site substituents consisting of Sr, Ca, Ba and Mg, and (ii) B-site substituents selected from the group consisting of Nb and Ta. The perovskite crystal thin film material may be formed by liquid delivery MOCVD from metalorganic precursors of the metal components of the thin film, to form PZT and PSZT, and other piezoelectric and ferroelectric thin film materials. The thin films of the invention have utility in non-volatile ferroelectric memory devices (NV-FeRAMs), and in microelectromechanical systems (MEMS) as sensor and/or actuator elements, e.g., high speed digital system actuators requiring low input power levels.

A-SITE-AND/OR B-SITE-MODIFIED PBZRTIO3 MATERIALS AND (PB, SR, CA, BA, MG) (ZR, TI,NB, TA)O3 FILMS HAVING UTILITY IN FERROELECTRIC RANDOM ACCESS MEMORIES AND HIGH PERFORMANCE THIN FILM MICROACTUATORS

NASA Technical Reports Server (NTRS)

Bilodeau, Steven (Inventor); Baum, Thomas H. (Inventor); Roeder, Jeffrey F. (Inventor); Chen, Ing-Shin (Inventor)

2004-01-01

A modified PbZrTiO.sub.3 perovskite crystal material thin film, wherein the PbZrTiO.sub.3 perovskite crystal material includes crystal lattice A-sites and B-sites at least one of which is modified by the presence of a substituent selected from the group consisting of (i) A-site substituents consisting of Sr, Ca, Ba and Mg, and (ii) B-site substituents selected from the group consisting of Nb and Ta. The perovskite crystal thin film material may be formed by liquid delivery MOCVD from metalorganic precursors of the metal components of the thin film, to form PZT and PSZT, and other piezoelectric and ferroelectric thin film materials. The thin films of the invention have utility in non-volatile ferroelectric memory devices (NV-FeRAMs), and in microelectromechanical systems (MEMS) as sensor and/or actuator elements, e.g., high speed digital system actuators requiring low input power levels.

Design and analysis of micro-stirrer for thrombus dissolution

NASA Astrophysics Data System (ADS)

Morita, Minoru; Jiang, Zhongwei; Chijimatsu, Naoki

2007-12-01

Thrombus or blood clot may cause cerebral infarction and myocardial infarction if the clot can not be dissolved within several hours after it was formed. The objective of this study is to design a new structure of stirrer for thrombus dissolution. In this paper, to stir the solution with a high viscosity like blood, large amplitude was confirmed to be necessary for the stirrer by the fundamental experiment. For this purpose, shape of the stirrer and type of the actuator were changed, and force and displacement of the stirrer were analyzed. Sine waves with the resonance frequencies of the stirrer (50 V; 571 Hz) were used as the input signals. The performance of the stirrer was simulated by Finite Element Analysis (FEA) to obtain large displacement. Results showed that the amplitude at the tip of stirrer was 100 times larger than the output displacement of the PZT actuator stimulated with the resonance frequency. Concluding this paper, a new type of the micro-stirrer was designed and analyzed by FEA and it was found that the proposed stirrer had a large amplitude with a good input voltage efficiency.

Very high frequency (beyond 100 MHz) PZT kerfless linear arrays.

PubMed

Wu, Da-Wei; Zhou, Qifa; Geng, Xuecang; Liu, Chang-Geng; Djuth, Frank; Shung, K Kirk

2009-10-01

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-microm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-microm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss).

Very High Frequency (Beyond 100 MHz) PZT Kerfless Linear Arrays

PubMed Central

Wu, Da-Wei; Zhou, Qifa; Geng, Xuecang; Liu, Chang-Geng; Djuth, Frank; Shung, K. Kirk

2010-01-01

This paper presents the design, fabrication, and measurements of very high frequency kerfless linear arrays prepared from PZT film and PZT bulk material. A 12-µm PZT thick film fabricated from PZT-5H powder/solution composite and a piece of 15-µm PZT-5H sheet were used to fabricate 32-element kerfless high-frequency linear arrays with photolithography. The PZT thick film was prepared by spin-coating of PZT sol-gel composite solution. The thin PZT-5H sheet sample was prepared by lapping a PZT-5H ceramic with a precision lapping machine. The measured results of the 2 arrays were compared. The PZT film array had a center frequency of 120 MHz, a bandwidth of 60% with a parylene matching layer, and an insertion loss of 41 dB. The PZT ceramic sheet array was found to have a center frequency of 128 MHz with a poorer bandwidth (40% with a parylene matching layer) but a better sensitivity (28 dB insertion loss). PMID:19942516

Switchable adhesion for wafer-handling based on dielectric elastomer stack transducers

NASA Astrophysics Data System (ADS)

Grotepaß, T.; Butz, J.; Förster-Zügel, F.; Schlaak, H. F.

2016-04-01

Vacuum grippers are often used for the handling of wafers and small devices. In order to evacuate the gripper, a gas flow is created that can harm the micro structures on the wafer. A promising alternative to vacuum grippers could be adhesive grippers with switchable adhesion. There have been some publications of gecko-inspired adhesive devices. Most of these former works consist of a structured surface which adheres to the object manipulated and an actuator for switching the adhesion. Until now different actuator principles have been investigated, like smart memory alloys and pneumatics. In this work for the first time dielectric elastomer stack transducers (DEST) are combined with a structured surface. DESTs are a promising new transducer technology with many applications in different industry sectors like medical devices, human-machine-interaction and soft robotics. Stacked dielectric elastomer transducers show thickness contraction originating from the electromechanical pressure of two compliant electrodes compressing an elastomeric dielectric when a voltage is applied. Since DESTs and the adhesive surfaces previously described are made of elastomers, it is self-evident to combine both systems in one device. The DESTs are fabricated by a spin coating process. If the flat surface of the spinning carrier is substituted for example by a perforated one, the structured elastomer surface and the DEST can be fabricated in one process. By electrical actuation the DEST contracts and laterally expands which causes the gecko-like cilia to adhere on the object to manipulate. This work describes the assembly and the experimental results of such a device using switchable adhesion. It is intended to be used for the handling of glass wafers.

Aerosol-Jet-Printing silicone layers and electrodes for stacked dielectric elastomer actuators in one processing device

NASA Astrophysics Data System (ADS)

Reitelshöfer, Sebastian; Göttler, Michael; Schmidt, Philip; Treffer, Philipp; Landgraf, Maximilian; Franke, Jörg

2016-04-01

In this contribution we present recent findings of our efforts to qualify the so called Aerosol-Jet-Printing process as an additive manufacturing approach for stacked dielectric elastomer actuators (DEA). With the presented system we are able to print the two essential structural elements dielectric layer and electrode in one machine. The system is capable of generating RTV-2 silicone layers made of Wacker Elastosil P 7670. Therefore, two aerosol streams of both precursor components A and B are generated in parallel and mixed in one printing nozzle that is attached to a 4-axis kinematic. At maximum speed the printing of one circular Elastosil layer with a calculated thickness of 10 μm and a diameter of 1 cm takes 12 seconds while the process keeps stable for 4.5 hours allowing a quite high overall material output and the generation of numerous silicone layers. By adding a second printing nozzle and the infrastructure to generate a third aerosol, the system is also capable of printing inks with conductive particles in parallel to the silicone. We have printed a reduced graphene oxide (rGO) ink prepared in our lab to generate electrodes on VHB 4905, Elastosil foils and finally on Aerosol-Jet-Printed Elastosil layers. With rGO ink printed on Elastosil foil, layers with a 4-point measured sheet resistance as low as 4 kΩ can be realized leaving room for improving the electrode printing time, which at the moment is not as good as the quite good time-frame for printing the silicone layers. Up to now we have used the system to print a fully functional two-layer stacked DEA to demonstrate the principle of continuously 3D printing actuators.

Actuating Mechanism and Design of a Cylindrical Traveling Wave Ultrasonic Motor Using Cantilever Type Composite Transducer

PubMed Central

Liu, Yingxiang; Chen, Weishan; Liu, Junkao; Shi, Shengjun

2010-01-01

Background Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. Principal Findings A cylindrical type traveling wave ultrasonic motor using cantilever type composite transducer was proposed in this paper. There are two cantilevers on the outside surface of cylinder, four longitudinal PZT ceramics are set between the cantilevers, and four bending PZT ceramics are set on each outside surface of cantilevers. Two degenerate flexural vibration modes spatially and temporally orthogonal to each other in the cylinder are excited by the composite transducer. In this new design, a single transducer can excite a flexural traveling wave in the cylinder. Thus, elliptical motions are achieved on the teeth. The actuating mechanism of proposed motor was analyzed. The stator was designed with FEM. The two vibration modes of stator were degenerated. Transient analysis was developed to gain the vibration characteristic of stator, and results indicate the motion trajectories of nodes on the teeth are nearly ellipses. Conclusions The study results verify the feasibility of the proposed design. The wave excited in the cylinder isn't an ideal traveling wave, and the vibration amplitudes are inconsistent. The distortion of traveling wave is generated by the deformation of bending vibration mode of cylinder, which is caused by the coupling effect between the cylinder and transducer. Analysis results also prove that the objective motions of nodes on the teeth are three-dimensional vibrations. But, the vibration in axial direction is minute compared with the vibrations in circumferential and radial direction. The results of this paper can guide the development of this new type of motor. PMID:20368809

Piezoelectric self-sensing actuator for active vibration control of motorized spindle based on adaptive signal separation

NASA Astrophysics Data System (ADS)

He, Ye; Chen, Xiaoan; Liu, Zhi; Qin, Yi

2018-06-01

The motorized spindle is the core component of CNC machine tools, and the vibration of it reduces the machining precision and service life of the machine tools. Owing to the fast response, large output force, and displacement of the piezoelectric stack, it is often used as the actuator in the active vibration control of the spindle. A piezoelectric self-sensing actuator (SSA) can reduce the cost of the active vibration control system and simplify the structure by eliminating the use of a sensor, because a SSA can have both actuating and sensing functions at the same time. The signal separation method of a SSA based on a bridge circuit is widely applied because of its simple principle and easy implementation. However, it is difficult to maintain dynamic balance of the circuit. Prior research has used adaptive algorithm to balance of the bridge circuit on the flexible beam dynamically, but those algorithms need no correlation between sensing and control voltage, which limit the applications of SSA in the vibration control of the rotor-bearing system. Here, the electromechanical coupling model of the piezoelectric stack is established, followed by establishment of the dynamic model of the spindle system. Next, a new adaptive signal separation method based on the bridge circuit is proposed, which can separate relative small sensing voltage from related mixed voltage adaptively. The experimental results show that when the self-sensing signal obtained from the proposed method is used as a displacement signal, the vibration of the motorized spindle can be suppressed effectively through a linear quadratic Gaussian (LQG) algorithm.

Using Diffusion Bonding in Making Piezoelectric Actuators

NASA Technical Reports Server (NTRS)

Sager, Frank E.

2003-01-01

A technique for the fabrication of piezoelectric actuators that generate acceptably large forces and deflections at relatively low applied voltages involves the stacking and diffusion bonding of multiple thin piezoelectric layers coated with film electrodes. The present technique stands in contrast to an older technique in which the layers are bonded chemically, by use of urethane or epoxy agents. The older chemical-bonding technique entails several disadvantages, including the following: It is difficult to apply the bonding agents to the piezoelectric layers. It is difficult to position the layers accurately and without making mistakes. There is a problem of disposal of hazardous urethane and epoxy wastes. The urethane and epoxy agents are nonpiezoelectric materials. As such, they contribute to the thickness of a piezoelectric laminate without contributing to its performance; conversely, for a given total thickness, the performance of the laminate is below that of a unitary piezoelectric plate of the same thickness. The figure depicts some aspects of the fabrication of a laminated piezoelectric actuator by the present diffusion- bonding technique. First, stock sheets of the piezoelectric material are inspected and tested. Next, the hole pattern shown in the figure is punched into the sheets. Alternatively, if the piezoelectric material is not a polymer, then the holes are punched in thermoplastic films. Then both faces of each punched piezoelectric sheet or thermoplastic film are coated with a silver-ink electrode material by use of a silkscreen printer. The electrode and hole patterns are designed for minimal complexity and minimal waste of material. After a final electrical test, all the coated piezoelectric layers (or piezoelectric layers and coated thermoplastic films) are stacked in an alignment jig, which, in turn, is placed in a curved press for the diffusion-bonding process. In this process, the stack is pressed and heated at a specified curing temperature and pressure for a specified curing time. The pressure, temperature, and time depend on the piezoelectric material selected. At the end of the diffusion-bonding process, the resulting laminated piezoelectric actuator is tested to verify the adequacy of the mechanical output as a function of an applied DC voltage.

A Mesoscopic Electromechanical Theory of Ferroelectric Films and Ceramics

NASA Astrophysics Data System (ADS)

Li, Jiangyu; Bhattacharya, Kaushik

2002-08-01

We present a multi-scale modelling framework to predict the effective electromechanical behavior of ferroelectric ceramics and thin films. This paper specifically focuses on the mesoscopic scale and models the effects of domains and domain switching taking into account intergranular constraints. Starting from the properties of the single crystal and the pre-poling granular texture, the theory predicts the domain patterns, the post-poling texture, the saturation polarization, saturation strain and the electromechanical moduli. We demonstrate remarkable agreement with experimental data. The theory also explains the superior electromechanical property of PZT at the morphotropic phase boundary. The paper concludes with the application of the theory to predict the optimal texture for enhanced electromechanical coupling factors and high-strain actuation in selected materials.

Active Interior Noise Control Studies

NASA Technical Reports Server (NTRS)

Park, J.; Veeramani, S.; Sampath, A.; Balachandran, B.; Wereley, N.

1996-01-01

Analytical and experimental investigations into the control of noise in the interior of a three-dimensional enclosure with a flexible boundary are presented. The rigid boundaries are constructed from acrylic material, and in the different cases considered the flexible boundary is constructed from either aluminum or composite material. Noise generated by an external speaker is transmitted into the enclosure through the flexible boundary and active control is realized by using Lead Zirconate Titanate (PZT) piezoelectric actuators bonded to the flexible boundary. Condenser microphones are used for noise measurements inside and outside the enclosure. Minimization schemes for global and local noise control in the presence of a harmonic disturbance are developed and discussed. In the experiments, analog feedforward control is implemented by using the harmonic disturbance as a reference signal.

Dielectric elastomer bending tube actuators with rigid electrode structures

NASA Astrophysics Data System (ADS)

Wehrheim, F.; Schlaak, H. F.; Meyer, J.-U.

2010-04-01

The common approach for dielectric elastomer actuators (DEA) is based on the assumption that compliant electrodes are a fundamental design requirement. For tube-like applications compliant electrodes cause a change of the actuator diameter during actuation and would require additional support-structures. Focused on thinwalled actuator-tube geometries room consumption and radial stabilityr epresent crucial criteria. Following the ambition of maximum functional integration, the concept of using a rigid electrode structure arises. This structure realizes both, actuation and support characteristics. The intended rigid electrode structure is based on a stacked DEA with a non-compressible dielectric. Byactu ation, the displaced dielectric causes an overlap. This overlap serves as an indicator for geometrical limitations and has been used to extract design rules regarding the electrode size, electrode distance and maximum electrode travel. Bycons idering the strain in anydir ection, the mechanical efficiencyhas been used to define further design aspects. To verifyt he theoretic analysis, a test for determination of the compressive stress-strain-characteristics has been applied for different electrode setups. As result the geometrydep ending elastic pressure module has been formulated by implementation of a shape factor. The presented investigations consider exclusive the static behavior of a DEA-setup with rigid electrodes.

Temperature Dependent Electrical Properties of PZT Wafer

NASA Astrophysics Data System (ADS)

Basu, T.; Sen, S.; Seal, A.; Sen, A.

2016-04-01

The electrical and electromechanical properties of lead zirconate titanate (PZT) wafers were investigated and compared with PZT bulk. PZT wafers were prepared by tape casting technique. The transition temperature of both the PZT forms remained the same. The transition from an asymmetric to a symmetric shape was observed for PZT wafers at higher temperature. The piezoelectric coefficient (d 33) values obtained were 560 pc/N and 234 pc/N, and the electromechanical coupling coefficient (k p) values were 0.68 and 0.49 for bulk and wafer, respectively. The reduction in polarization after fatigue was only ~3% in case of PZT bulk and ~7% for PZT wafer.

Combined application of FBG and PZT sensors for plantar pressure monitoring at low and high speed walking.

PubMed

Suresh, R; Bhalla, S; Singh, C; Kaur, N; Hao, J; Anand, S

2015-01-01

Clinical monitoring of planar pressure is vital in several pathological conditions, such as diabetes, where excess pressure might have serious repercussions on health of the patient, even to the extent of amputation. The main objective of this paper is to experimentally evaluate the combined application of the Fibre Bragg Grating (FBG) and the lead zirconate titanate (PZT) piezoceramic sensors for plantar pressure monitoring during walk at low and high speeds. For fabrication of the pressure sensors, the FBGs are embedded within layers of carbon composite material and stacked in an arc shape. From this embedding technique, average pressure sensitivity of 1.3 pm/kPa and resolution of nearly 0.8 kPa is obtained. These sensors are found to be suitable for measuring the static and the low-speed walk generated foot pressure. Simultaneously, PZT patches of size 10 × 10 × 0.3 mm were used as sensors, utilizing the d_{33} (thickness) coupling mode. A sensitivity of 7.06 mV/kPa and a pressure resolution of 0.14 kPa is obtained from these sensors, which are found to be suitable for foot pressure measurement during high speed walking and running. Both types of sensors are attached to the underside of the sole of commercially available shoes. In the experiments, a healthy male subject walks/runs over the treadmill wearing the fabricated shoes at various speeds and the peak pressure is measured using both the sensors. Commercially available low-cost hardware is used for interrogation of the two sensor types. The test results clearly show the feasibility of the FBG and the PZT sensors for measurement of plantar pressure. The PZT sensors are more accurate for measurement of pressure during walking at high speeds. The FBG sensors, on the other hand, are found to be suitable for static and quasi-dynamic (slow walking) conditions. Typically, the measured pressure varied from 400 to 600 kPa below the forefoot and 100 to 1000 kPa below the heel as the walking speed varied from 1 kilometer per hour (kmph) to 7 kmph. When instrumented in combination, the two sensors can enable measurements ranging from static to high speed conditions Both the sensor types are rugged, small sized and can be easily embedded in commercial shoes and enable plantar pressure measurement in a cost-effective manner. This research is expected to have application in the treatment of patients suffering from diabetes and gonarthrosis.

Porous PZT ceramics for receiving transducers.

PubMed

Kara, Hudai; Ramesh, Rajamani; Stevens, Ron; Bowen, Chris R

2003-03-01

PZT-air (porous PZT) and PZT-polymer (polymer impregnated porous PZT) piezocomposites with varying porosity/polymer volume fractions have been manufactured. The composites were characterized in terms of hydrostatic charge (dh) and voltage (gh) coefficients, permittivity, hydrostatic figure of merit (dh.gh), and absolute sensitivity (M). With decreasing PZT ceramic volume, gh increased, and dh.gh had a broad maximum around 80 to 90% porosity/polymer content. The absolute sensitivity was also increased. In each case, PZT-air piezocomposites performed better than PZT-polymer piezocomposites. Hydrophones constructed from piezocomposites showed slightly lower measured receiving sensitivities than calculated values for piezocomposite materials, which was due to the loading effect of the cable and the low permittivity associated with the piezocomposites.

Turtle mimetic soft robot with two swimming gaits.

PubMed

Song, Sung-Hyuk; Kim, Min-Soo; Rodrigue, Hugo; Lee, Jang-Yeob; Shim, Jae-Eul; Kim, Min-Cheol; Chu, Won-Shik; Ahn, Sung-Hoon

2016-05-04

This paper presents a biomimetic turtle flipper actuator consisting of a shape memory alloy composite structure for implementation in a turtle-inspired autonomous underwater vehicle. Based on the analysis of the Chelonia mydas, the flipper actuator was divided into three segments containing a scaffold structure fabricated using a 3D printer. According to the filament stacking sequence of the scaffold structure in the actuator, different actuating motions can be realized and three different types of scaffold structures were proposed to replicate the motion of the different segments of the flipper of the Chelonia mydas. This flipper actuator can mimic the continuous deformation of the forelimb of Chelonia mydas which could not be realized in previous motor based robot. This actuator can also produce two distinct motions that correspond to the two different swimming gaits of the Chelonia mydas, which are the routine and vigorous swimming gaits, by changing the applied current sequence of the SMA wires embedded in the flipper actuator. The generated thrust and the swimming efficiency in each swimming gait of the flipper actuator were measured and the results show that the vigorous gait has a higher thrust but a relatively lower swimming efficiency than the routine gait. The flipper actuator was implemented in a biomimetic turtle robot, and its average swimming speed in the routine and vigorous gaits were measured with the vigorous gait being capable of reaching a maximum speed of 11.5 mm s(-1).

A novel multi-actuation CMOS RF MEMS switch

NASA Astrophysics Data System (ADS)

Lee, Chiung-I.; Ko, Chih-Hsiang; Huang, Tsun-Che

2008-12-01

This paper demonstrates a capacitive shunt type RF MEMS switch, which is actuated by electro-thermal actuator and electrostatic actuator at the same time, and than latching the switching status by electrostatic force only. Since thermal actuators need relative low voltage compare to electrostatic actuators, and electrostatic force needs almost no power to maintain the switching status, the benefits of the mechanism are very low actuation voltage and low power consumption. Moreover, the RF MEMS switch has considered issues for integrated circuit compatible in design phase. So the switch is fabricated by a standard 0.35um 2P4M CMOS process and uses wet etching and dry etching technologies for postprocess. This compatible ability is important because the RF characteristics are not only related to the device itself. If a packaged RF switch and a packaged IC wired together, the parasitic capacitance will cause the problem for optimization. The structure of the switch consists of a set of CPW transmission lines and a suspended membrane. The CPW lines and the membrane are in metal layers of CMOS process. Besides, the electro-thermal actuators are designed by polysilicon layer of the CMOS process. So the RF switch is only CMOS process layers needed for both electro-thermal and electrostatic actuations in switch. The thermal actuator is composed of a three-dimensional membrane and two heaters. The membrane is a stacked step structure including two metal layers in CMOS process, and heat is generated by poly silicon resistors near the anchors of membrane. Measured results show that the actuation voltage of the switch is under 7V for electro-thermal added electrostatic actuation.

Development of endovascular vibrating polymer actuator probe for mechanical thrombolysis: a phantom study.

PubMed

Choi, Seung Hong; Yoon, Bye-Ri; Oh, Jin Sun; Han, Moon Hee; Lee, Jang Yeol; Cho, Hye Rim; Kim, Moon June; Rhee, Kyehan; Jho, Jae Young

2011-01-01

In this study, we propose a new method for enhancement of intraarterial thrombolysis using an ionic polymer-metal composite (IPMC) actuator. The purpose of this study was to test the mechanical thrombolysis efficiency of IPMC actuators and evaluate the endovascular vibrating polymer actuator probe for mechanical thrombolysis in a phantom model; 2 × 1 × 15 mm (2 mm in width, 1 mm in thickness, and 15 mm in length) and 0.8 × 0.8 × 10 mm (0.8 mm in width, 0.8 mm in thickness, and 10 mm in length) IPMC actuators were fabricated by stacking five and four Nafion-117 films, respectively. We manufactured the endovascular vibrating polymer actuator probe, for which thrombolysis efficiency was tested in a vascular phantom. The phantom study using 2 × 1 × 15 mm IPMC actuators showed that 5 Hz actuation is the optimal frequency for thrombolysis under both 2 and 3 V, when blood clot was not treated with rtPA, and when exposed to rtPA, IPMC actuators under the optimized condition (3 V, 5 Hz, and 5 min) significantly increased the thrombolysis degree compared with control and other experimental groups (p < 0.05). In addition, 0.8 × 0.8 × 10 mm IPMC actuators also revealed a significantly higher thrombolysis degree under the optimized condition than the control and rtPA only groups (p < 0.05). Finally, the fabricated probe using 0.8 × 0.8 × 10 mm IPMC actuators also incurred higher thrombolysis degree under the optimized condition than the control and rtPA only groups (p < 0.05). A vibrating polymer actuator probe is a feasible device for intravascular thrombolysis, and further study in an animal model is warranted.

Photovoltaic enhancement due to surface-plasmon assisted visible-light absorption at the inartificial surface of lead zirconate-titanate film

NASA Astrophysics Data System (ADS)

Zheng, Fengang; Zhang, Peng; Wang, Xiaofeng; Huang, Wen; Zhang, Jinxing; Shen, Mingrong; Dong, Wen; Fang, Liang; Bai, Yongbin; Shen, Xiaoqing; Sun, Hua; Hao, Jianhua

2014-02-01

PZT film of 300 nm thickness was deposited on tin indium oxide (ITO) coated quartz by a sol-gel method. Four metal electrodes, such as Pt, Au, Cu and Ag, were used as top electrodes deposited on the same PZT film by sputtering at room temperature. In ITO-PZT-Ag and ITO-PZT-Au structures, the visible light (400-700 nm) can be absorbed partially by a PZT film, and the maximum efficiency of photoelectric conversion of the ITO-PZT-Ag structure was enhanced to 0.42% (100 mW cm-2, AM 1.5G), which is about 15 times higher than that of the ITO-PZT-Pt structure. Numerical simulations show that the natural random roughness of polycrystalline-PZT-metal interface can offer a possibility of coupling between the incident photons and SPs at the metal surface. The coincidence between the calculated SP properties and the measured EQE spectra reveals the SP origin of the photovoltaic enhancement in these ITO-PZT-metal structures, and the improved photocurrent output is caused by the enhanced optical absorption in the PZT region near the metal surface, rather than by the direct charge-transfer process between two materials.PZT film of 300 nm thickness was deposited on tin indium oxide (ITO) coated quartz by a sol-gel method. Four metal electrodes, such as Pt, Au, Cu and Ag, were used as top electrodes deposited on the same PZT film by sputtering at room temperature. In ITO-PZT-Ag and ITO-PZT-Au structures, the visible light (400-700 nm) can be absorbed partially by a PZT film, and the maximum efficiency of photoelectric conversion of the ITO-PZT-Ag structure was enhanced to 0.42% (100 mW cm-2, AM 1.5G), which is about 15 times higher than that of the ITO-PZT-Pt structure. Numerical simulations show that the natural random roughness of polycrystalline-PZT-metal interface can offer a possibility of coupling between the incident photons and SPs at the metal surface. The coincidence between the calculated SP properties and the measured EQE spectra reveals the SP origin of the photovoltaic enhancement in these ITO-PZT-metal structures, and the improved photocurrent output is caused by the enhanced optical absorption in the PZT region near the metal surface, rather than by the direct charge-transfer process between two materials. Electronic supplementary information (ESI) available. See DOI: 10.1039/c3nr05757g

Measurement of Ferroelectric Films in MFM and MFIS Structures

NASA Astrophysics Data System (ADS)

Anderson, Jackson D.

For many years ferroelectric memory has been used in applications requiring low power, yet mainstream adoption has been stifled due to integration and scaling issues. With the renewed interest in these devices due to the recent discovery of ferroelectricity in HfO2, it is imperative that the properties of these films are well understood. To aid that end, a ferroelectric analysis package has been developed and released on GitHub and PyPI under a creative commons non-commercial share-alike license. This package contains functions for visualization and analysis of data from polarization, leakage current, and FORC measurements as well as basic modeling capability. Functionality is verified via the analysis of lead zirconate titanate (PZT) capacitors, where a multi-domain simulation based on an experimental Preisach density shows decent agreement despite measurement noise. The package is then used in the analysis of ferroelectric HfO2 films deposited in metal-ferroelectric-metal (MFM) and metal-ferroelectric-insulator-semiconductor (MFIS) stacks. 13.5 nm HfO2 films deposited on a semiconductor surface are shown to have a coercive voltage of 2.5 V, rather than the 1.9 V of the film in an MFM stack. This value further increases to 3-5 V when a lightly doped semiconductor depletion and inversion capacitance is added to the stack. The magnitude of this change is more than can be accounted for from the 10% voltage drop across the interfacial oxide layer, indicating that the modified surface properties are impacting the formation of the ferroelectric phase during anneal. In light of this, care should be taken to map out ferroelectric HfO2 properties using the particular physical stack that will be used, rather than using an MFM stack as a proxy.

Effect of the Number of PZT Coatings on the Crystal Structure and Piezoelectric Properties in PZT-CNT Nanocomposites

NASA Astrophysics Data System (ADS)

Kang, Sin Wook; Cho, Sam Yeon; Bu, Sang Don; Han, Jin Kyu; Lee, Gyoung-Ja; Lee, Min-Ku

2018-05-01

In this study, a nanocomposite was successfully fabricated by mixing Pb(Zr,Ti)O3 (PZT) prepared by using the sol-gel method and functionalized multi-walled carbon nanotubes (MWCNTs). During this process, the effect of the change in the molar concentration of PZT on the crystallinity and the piezoelectric properties of the PZT in the nanocomposite was investigated. As the number of PZT coatings was increased from one to three, PZT was confirmed as having completely covered the MWCNT nanocomposite. Also, the tetragonality of PZT in the crystal structure was confirmed to have increased with increasing number of PZT coatings. Such an increase in crystallinity was followed by an increase in the ferroelectricity of the nanocomposite. A nano-generator was fabricated by using the nanocomposite fabricated as described above, and the characteristics of the nanogenerator were confirmed to have been improved with increasing number of coatings.

Enhanced dielectric constant and fatigue-resistance of PbZr0.4Ti0.6O3 capacitor with magnetic intermetallic FePt top electrode

NASA Astrophysics Data System (ADS)

Liu, B. T.; Zhao, J. W.; Li, X. H.; Zhou, Y.; Bian, F.; Wang, X. Y.; Zhao, Q. X.; Wang, Y. L.; Guo, Q. L.; Wang, L. X.; Zhang, X. Y.

2010-06-01

Both FePt/PbZr0.4Ti0.6O3(PZT)/Pt and Pt/PZT/Pt ferroelectric capacitors have been fabricated on Si substrates. It is found that up to 109 switching cycles, the FePt/PZT/Pt capacitor, measured at 50 kHz, with polarization decreased by 57%, is superior to the Pt/PZT/Pt capacitor by 82%, indicating that an intermetallic FePt top electrode can also improve the fatigue-resistance of a PZT capacitor. Maximum dielectric constants are 980 and 770 for PZT capacitors with FePt and Pt, respectively. This is attributed to the interface effect between PZT film and the top electrode since the interfacial capacitance of FePt/PZT is 3.5 times as large as that of Pt/PZT interface.

Intracardiac ultrasound scanner using a micromachine (MEMS) actuator.

PubMed

Zara, J M; Bobbio, S M; Goodwin-Johansson, S; Smith, S W

2000-01-01

Catheter-based intracardiac ultrasound offers the potential for improved guidance of interventional cardiac procedures. The objective of this research is the development of catheter-based mechanical sector scanners incorporating high frequency ultrasound transducers operating at frequencies up to 20 MHz. The authors' current transducer assembly consists of a single 1.75 mm by 1.75 mm, 20 MHz, PZT element mounted on a 2 mm by 2 mm square, 75 mum thick polyimide table that pivots on 3-mum thick gold plated polyimide hinges. The hinges also serve as the electrical connections to the transducer. This table-mounted transducer is tilted using a miniature linear actuator to produce a sector scan. This linear actuator is an integrated force array (IFA), which is an example of a micromachine, i.e., a microelectromechanical system (MEMS). The IFA is a thin (2.2 mum) polyimide membrane, which consists of a network of hundreds of thousands of micron scale deformable capacitors made from pairs of metallized polyimide plates. IFAs contract with an applied voltage of 30-120 V and have been shown to produce strains as large as 20% and forces of up to 8 dynes. The prototype transducer and actuator assembly was fabricated and interfaced with a GagePCI analog to digital conversion board digitizing 12 bit samples at a rate of 100 MSamples/second housed in a personal computer to create a single channel ultrasound scanner. The deflection of the table transducer in a low viscosity insulating fluid (HFE 7100, 3M) is up to +/-10 degrees at scan rates of 10-60 Hz. Software has been developed to produce real-time sector scans on the PC monitor.

High-frequency, resonance-enhanced microactuators with active structures for high-speed flow control

NASA Astrophysics Data System (ADS)

Kreth, Phillip Andrew

The need for actuators that are adaptable for use in a wide array of applications has been the motivation behind actuator development research over the past few years. Recent developments at the Advanced Aero-Propulsion Laboratory (AAPL) at Florida State University have produced a microactuator that uses the unsteadiness of a small-scale impinging jet to produce pulsed, supersonic microjets -- this is referred to as the Resonance-Enhanced Microjet (REM) actuator. Prior studies on these actuators at AAPL have been somewhat limited in that the actuator response has only been characterized through pressure/acoustic measurements and qualitative flow visualizations. Highly-magnified particle image velocimetry (PIV) measurements were performed to measure the velocity fields of both a 1 mm underexpanded jet and an REM actuator. The results demonstrate that this type of microactuator is capable of producing pulsed, supersonic microjets that have velocities of approximately 400 m/s that are sustained for significant portions of their cycles (> 60 %). These are the first direct velocity measurements of these flowfields, and they allow for a greater understanding of the flow physics associated with this microactuator. The previous studies on the REM actuators have shown that the microactuator volume is among the principal parameters in determining the actuator's maximum-amplitude frequency component. In order to use this actuator in a closed-loop, feedback control system, a modified design that incorporates smart materials is studied. The smart materials (specifically piezoelectric ceramic stack actuators) have been implemented into the microactuator to actively change its geometry, thus permitting controllable changes in the microactuator's resonant frequency. The distinct feature of this design is that the smart materials are not used to produce the primary perturbation or flow from the actuator (which has in the past limited the control authority of other designs) but to change its dynamic properties. Various static and dynamic control inputs to the piezo-stacks illustrate that the actuator's resonant frequency can be modulated by a few hundred Hertz at very fast rates (up to 1 kHz or more). These frequency modulation capabilities allow for off-design frequencies to be present in the actuator's output, thereby increasing its range of potential flow control applications. A series of closed-loop control demonstrations clearly show the ability of this actuator to track and produce outputs at specified frequencies. The robustness of this control technique was also demonstrated. By combining the REM actuator concept with the precision and control authority of smart materials, the new actuator system (known as the SmartREM actuator) is shown to produce supersonic, pulsing microjets whose frequency can be controlled actively in a closed-loop manner. Three different design possibilities are developed and characterized in this study. An optimal configuration was identified for cavity flow control experiments in both sub- and supersonic freestream conditions (M = 0.4 - 0.7 and M = 1.5). The actuator was designed such that its frequency would lie within the range of the predicted cavity oscillations. The actuator's performance was evaluated in its three modes of operations: pulsed (REM mode), active pulsed (SmartREM mode), and steady. It was found that when the actuator operates in its pulsed modes, the amplitude of the dominant peak is reduced by as much as 6 dB. The high-frequency broadband levels and overall sound pressure levels (OASPLs) are reduced with control as well (by about 3 dB). Operating the actuator in its steady mode at very high pressures provides the most effective results. The dominant peaks were completely eliminated (amplitudes reduced by over 25 dB), and the reductions in the OASPLs exceeded 10 dB.

Superconductivity Devices: Commercial Use of Space

NASA Technical Reports Server (NTRS)

Haertling, Gene (Principal Investigator); Furman, Eugene; Li, Guang

1996-01-01

The work described in this report covers various aspects of the Rainbow solid-state actuator and sensor technologies. It is presented in five parts dealing with sensor applications, nonlinear properties, stress-optic and electrooptic properties, stacks and arrays, and publications. The Rainbow actuator technology is a relatively new materials development which had its inception in 1992. It involves a new processing technique for preparing pre-stressed, high lead containing piezoelectric and electrostrictive ceramic materials. Ceramics fabricated by this method produce bending-mode actuator devices which possess several times more displacement and load bearing capacity than present-day benders. Since they can also be used in sensor applications, Rainbows are part of the family of materials known as smart ceramics. During this period, PLZT Rainbow ceramics were characterized with respect to their piezoelectric properties for potential use in stress sensor applications. Studies of the nonlinear and stress-optic/electrooptic birefringent properties were also initiated during this period. Various means for increasing the utility of stress-enhanced Rainbow actuators are presently under investigation.

Elution of lead from lead zirconate titanate ceramics to acid rain

NASA Astrophysics Data System (ADS)

Tsurumi, Takaaki; Takezawa, Shuhei; Hoshina, Takuya; Takeda, Hiroaki

2017-10-01

The amount of lead that eluted from lead zirconate titanate (PZT) ceramics to artificial acid rain was evaluated. Four kinds of PZT ceramics, namely, pure PZT at MPB composition, CuO-added PZT, PZT with 10 mol % substitution of Ba for Pb, and CuO-added PZT with 10 mol % substitution of Ba for Pb, were used as samples of the elution test. These PZT ceramics of 8 mm2 and 1.1-1.2 mm thickness were suspended in 300 ml of H2SO4 solution of pH 4.0. The concentration of lead eluted from PZT was in the range from 0.2 to 0.8 ppm. It was found that both liquid phase formation by the addition of CuO and the substitution of Ba for Pb were effective to reduce the amount of lead that eluted. By fitting the leaching out curve with a classical equation, a master curve assuming no sampling effect was obtained. The lead concentration evaluated from the amount of lead that eluted from a commercial PZT plate to H2SO4 solution of pH 5.3 was almost the same as the limit in city water. It is concluded that PZT is not harmful to health and the environment and the amount of lead that eluted from PZT can be controlled by modifying PZT composition.

Development of smart piezoelectric transducer self-sensing, self-diagnosis and tuning schemes for structural health monitoring applications

NASA Astrophysics Data System (ADS)

Lee, Sang Jun

Autonomous structural health monitoring (SHM) systems using active sensing devices have been studied extensively to diagnose the current state of aerospace, civil infrastructure and mechanical systems in near real-time and aims to eventually reduce life-cycle costs by replacing current schedule-based maintenance with condition-based maintenance. This research develops four schemes for SHM applications: (1) a simple and reliable PZT transducer self-sensing scheme; (2) a smart PZT self-diagnosis scheme; (3) an instantaneous reciprocity-based PZT diagnosis scheme; and (4) an effective PZT transducer tuning scheme. First, this research develops a PZT transducer self-sensing scheme, which is a necessary condition to accomplish a PZT transducer self-diagnosis. Main advantages of the proposed self-sensing approach are its simplicity and adaptability. The necessary hardware is only an additional self-sensing circuit which includes a minimum of electric components. With this circuit, the self-sensing parameters can be calibrated instantaneously in the presence of changing operational and environmental conditions of the system. In particular, this self-sensing scheme focuses on estimating the mechanical response in the time domain for the subsequent applications of the PZT transducer self-diagnosis and tuning with guided wave propagation. The most significant challenge of this self-sensing comes from the fact that the magnitude of the mechanical response is generally several orders of magnitude smaller than that of the input signal. The proposed self-sensing scheme fully takes advantage of the fact that any user-defined input signals can be applied to a host structure and the input waveform is known. The performance of the proposed self-sensing scheme is demonstrated by theoretical analysis, numerical simulations and various experiments. Second, this research proposes a smart PZT transducer self-diagnosis scheme based on the developed self-sensing scheme. Conventionally, the capacitance change of the PZT wafer is monitored to identify the abnormal PZT condition because the capacitance of the PZT wafer is linearly proportional to its size and also related to the bonding condition. However, temperature variation is another primary factor that affects the PZT capacitance. To ensure the reliable transducer self-diagnosis, two different self-diagnosis features are proposed to differentiate two main PZT wafer defects, i.e., PZT debonding and PZT cracking, from temperature variations and structural damages. The PZT debonding is identified using two indices based on time reversal process (TRP) without any baseline data. Also, the PZT cracking is identified by monitoring the change of the generated Lamb wave power ratio index with respect to the driving frequency. The uniqueness of this self-diagnosis scheme is that the self-diagnosis features can differentiate the PZT defects from environmental variations and structural damages. Therefore, it is expected to minimize false-alarms which are induced by operational or environmental variations as well as structural damages. The applicability of the proposed self-diagnosis scheme is verified by theoretical analysis, numerical simulations, and experimental tests. Third, a new methodology of guided wave-based PZT transducer diagnosis is developed to identify PZT transducer defects without using prior baseline data. This methodology can be applied when a number of same-size PZT transducers are attached to a target structure to form a sensor network. The advantage of the proposed technique is that abnormal PZT transducers among intact PZT transducers can be detected even when the system being monitored is subjected to varying operational and environmental conditions or changing structural conditions. To achieve this goal, the proposed diagnosis technique utilizes the linear reciprocity of guided wave propagation between a pair of surface-bonded PZT transducers. Finally, a PZT transducer tuning scheme is being developed for selective Lamb wave excitation and sensing. This is useful for structural damage detection based on Lamb wave propagation because the proper transducer size and the corresponding input frequency can be is crucial for selective Lamb wave excitation and sensing. The circular PZT response model is derived, and the energy balance is included for a better prediction of the PZT responses because the existing PZT response models do not consider any energy balance between Lamb wave modes. In addition, two calibration methods are also suggested in order to model the PZT responses more accurately by considering a bonding layer effect. (Abstract shortened by UMI.)

Silicone based dielectric elastomer strip actuators coupled with nonlinear biasing elements for large actuation strains

NASA Astrophysics Data System (ADS)

Hau, S.; Bruch, D.; Rizzello, G.; Motzki, P.; Seelecke, S.

2018-07-01

There are two major categories of dielectric elastomer actuators (DEAs), which differ from the way in which the actuation is exploited: stack DEAs, using the thickness compression, and membrane DEAs, which exploit the expansion in area. In this work we focus on a specific type of membrane DEAs, i.e., silicone-based strip-in-plane (SIP) DEAs with screen printed electrodes. The performance of such actuators strongly depends on their geometry and on the adopted mechanical biasing system. Typically, the biasing is based on elastomer pre-stretch or on dead loads, which results in relatively low actuation strain. Biasing systems characterized by a negative rate spring have proven to significantly increase the performance of circular out-of-plane DEAs. However, this kind of biasing has never been systematically applied to silicone SIP DEAs. In this work, the biasing design based on negative rate springs is extended to strip DEAs as well, allowing to improve speed, strain, and force of the resulting actuator. At first, the DEAs are characterized under electrical and mechanical loading. Afterwards, two actuator systems are studied and compared in terms of actuation strain, force output, and actuation speed. In a first design stage, the DEA is coupled with a linear spring. Subsequently, the membrane is loaded with a combination of linear and nonlinear spring (working in a negative stiffness region). The resulting stroke output of the second systems is more than 9 times higher in comparison to the first one. An actuation strain of up to 45% (11.2 millimeter) and a force output of 0.38 Newton are measured. A maximum speed of 0.29 m s‑1 is achieved, which is about 60 times faster than the one typically measured for similar systems based on VHB.

Characterization of a small Terfenol-D transducer in mechanically blocked configuration

NASA Astrophysics Data System (ADS)

Faidley, LeAnn E.; Dapino, Marcelo J.; Flatau, Alison B.

2001-08-01

In numerous applications, smart material transducers are employed to actuate upon virtually immovable structures, that is, structures whose stiffness approaches infinity in comparison with that of the transducer itself. Such mechanically blocked transducer configurations can be found in applications ranging from seismic testing and isolation of civil structures, to clamping mechanisms in linear or rotational inchworm motors. In addition to providing high blocking forces, smart materials for this type of applications must often be small in size and lightweight in order for design constraints to be met. This paper provides a characterization of the force produced by a 0.9 cm (0.35 in) diameter, 2.0 cm (0.79i in) long Terfenol-D operated under mechanically blocked conditions. Experimental results are shown for several mechanical preloads as well as various magnetic field intensities, waveforms, and frequencies. Optimal levels are deduced and discussed and the results are compared to published data for a PZT transducer of similar size operated in mechanically blocked configuration. The comparison reveals that the Terfenol-D rod provides higher blocking forces than its PZT counterpart. It is thus feasible to employ small magnetostrictive drivers in applications involving zero or near-zero displacement, particularly those based on hybrid magnetostrictive/piezoelectric designs in which high efficiencies are achieved by driving the two electrically complementary transducer materials at electrical resonance.

Simple-structured capillary-force-dominated tunable-focus liquid lens based on the higher-order-harmonic resonance of a piezoelectric ring transducer.

PubMed

Feng, Guo-Hua; Liu, Jun-Hao

2013-02-01

This paper proposes a tunable-focus liquid lens implemented with a simple cylindrical container structure and liquid as the lens material. The cylindrical container was constructed using a Pb [Zr(0.52)Ti(0.48)]O(3) (PZT) ring transducer and a polydimethylsiloxane membrane that was attached to a flat side of the transducer. The free surface of the liquid in the cylindrical container can be driven as a static-like convex lens with different curvatures because the higher-order harmonic resonance of the PZT transducer was electrically controlled. Based on a capillary-force-dominant design, the activated liquid lens maintained surface curvature in an arbitrary orientation without a gravitational effect. Profiles of the liquid lenses were characterized with the driving voltages of the transducer ranging from 12 to 60 V peak-to-peak (Vpp) at a resonant frequency of 460 kHz. The temperature effects on the lenses caused by the continuous operation of the transducer were measured. Images showed the various curvatures of the lenses with a range of actuation voltages. A change in focal length of eight times (5.72 to 46.03 cm) was demonstrated within the 10 Vpp variation of the driving voltage. For the characterized liquid lenses, the distortion was less than 2%, and the modulation transfer function reached 63 line pairs per mm (lp/mm) using ZEMAX analysis.

Monitoring of surface-fatigue crack propagation in a welded steel angle structure using guided waves and principal component analysis

NASA Astrophysics Data System (ADS)

Lu, Mingyu; Qu, Yongwei; Lu, Ye; Ye, Lin; Zhou, Limin; Su, Zhongqing

2012-04-01

An experimental study is reported in this paper demonstrating monitoring of surface-fatigue crack propagation in a welded steel angle structure using Lamb waves generated by an active piezoceramic transducer (PZT) network which was freely surface-mounted for each PZT transducer to serve as either actuator or sensor. The fatigue crack was initiated and propagated in welding zone of a steel angle structure by three-point bending fatigue tests. Instead of directly comparing changes between a series of specific signal segments such as S0 and A0 wave modes scattered from fatigue crack tips, a variety of signal statistical parameters representing five different structural status obtained from marginal spectrum in Hilbert-huang transform (HHT), indicating energy progressive distribution along time period in the frequency domain including all wave modes of one wave signal were employed to classify and distinguish different structural conditions due to fatigue crack initiation and propagation with the combination of using principal component analysis (PCA). Results show that PCA based on marginal spectrum is effective and sensitive for monitoring the growth of fatigue crack although the received signals are extremely complicated due to wave scattered from weld, multi-boundaries, notch and fatigue crack. More importantly, this method indicates good potential for identification of integrity status of complicated structures which cause uncertain wave patterns and ambiguous sensor network arrangement.

Fabrication of piezoelectric ceramic fibers by extrusion of PZT powder and PZT sol mixture

NASA Astrophysics Data System (ADS)

Kobayashi, Yoshimasa; Um, Tae Y.; Qiu, Jinhao; Tani, Junji; Takahashi, Hirofumi

2001-07-01

This study aims to fabricate Pb(Zr,Ti)O3 (PZT) piezoelectric ceramic fibers by extrusion with mixture of PZT powder and PZT sol. The added PZT sol in this study played a role as a binder; the sol changed into PZT crystalline during sintering, and removal process of additives before sintering was not required. To obtain PZT fibers, the condition of sol viscosity adjustment, the mixture ratio of powder and sol for fiber extrusion, and the sintering condition for obtaining polycrystalline fibers were investigated. PZT precursor solution was synthesized from lead acetate trihydrate, zirconium n-propoxide and titanium isopropoxide by reflux at 120 degree(s)C for 3 hours with 2-methoxyethanol. The appropriate adjustment of spinnable sol was achieved by the addition of acetic acid for suppressing the hydrolysis reaction and the curing sol at 80 degree(s)C for promoting the condensation of sol. Green fibers with diameter of about 300micrometers were successfully extruded from the mixture of PZT powder and sol. The extruded fibers sintered at 1200 degree(s)C had the microstructure with 2-6micrometers grains and had no pores or cracks. From the result of displacement behavior measurement, PZT fibers fabricated by firing at 1200 degree(s)C in this study were considered to have desired piezoelectric properties.

Manufacturing of PZT-nickel functionally graded piezoelectric ceramics

NASA Astrophysics Data System (ADS)

Rubio, Wilfredo M.; Silva, Emílio C. N.; Buiochi, Flávio

2012-05-01

A recent approach for designing and manufacturing piezoelectric ceramics consists of using the functionally graded materials (FGM) concept. In this work, nickel (Ni) is used to generate a new PZT-Ni graded ceramic and its dynamic behavior is experimentally explored. The PZT-Ni graded ceramic is manufactured by using the technique of Spark Plasma Sintering (SPS). The ceramic is graded from the top to the bottom surface (along 6 mm of thickness). Specifically, five layers of green powders are sintered: 100 wt% PZT-5A, 90 wt% PZT-5A and 10 wt% Ni, 80 wt% PZT-5A and 20 wt% Ni, 70 wt% PZT-5A and 30 wt% Ni, 60 wt% PZT-5A and 40 wt% Ni. Thus, Ni is used as a second phase, which is added to a PZT-5A matrix, changing its concentration. No manufacturing defects or cracks or exfoliated layers are observed. However, graphite diffusion is observed from the graphite die into the graded ceramic, which does not affect its performance; hence, the ceramic contains enough piezoelectric properties, which allows its polarization and dynamic characterization by determining the impedance curve of the PZT-Ni graded ceramic. The PZT-Ni graded ceramic vibrates at 1.04 MHz, 1.55 MHz and 2.07 MHz.

A Piezoelectric Unimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes

NASA Technical Reports Server (NTRS)

Yang, Eui-Hyeok; Shcheglov, Kirill

2002-01-01

Future concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.

Design optimization of embedded ultrasonic transducers for concrete structures assessment.

PubMed

Dumoulin, Cédric; Deraemaeker, Arnaud

2017-08-01

In the last decades, the field of structural health monitoring and damage detection has been intensively explored. Active vibration techniques allow to excite structures at high frequency vibrations which are sensitive to small damage. Piezoelectric PZT transducers are perfect candidates for such testing due to their small size, low cost and large bandwidth. Current ultrasonic systems are based on external piezoelectric transducers which need to be placed on two faces of the concrete specimen. The limited accessibility of in-service structures makes such an arrangement often impractical. An alternative is to embed permanently low-cost transducers inside the structure. Such types of transducers have been applied successfully for the in-situ estimation of the P-wave velocity in fresh concrete, and for crack monitoring. Up to now, the design of such transducers was essentially based on trial and error, or in a few cases, on the limitation of the acoustic impedance mismatch between the PZT and concrete. In the present study, we explore the working principles of embedded piezoelectric transducers which are found to be significantly different from external transducers. One of the major challenges concerning embedded transducers is to produce very low cost transducers. We show that a practical way to achieve this imperative is to consider the radial mode of actuation of bulk PZT elements. This is done by developing a simple finite element model of a piezoelectric transducer embedded in an infinite medium. The model is coupled with a multi-objective genetic algorithm which is used to design specific ultrasonic embedded transducers both for hard and fresh concrete monitoring. The results show the efficiency of the approach and a few designs are proposed which are optimal for hard concrete, fresh concrete, or both, in a given frequency band of interest. Copyright © 2017 Elsevier B.V. All rights reserved.

Energy harvesting through a backpack employing a mechanically amplified piezoelectric stack

NASA Astrophysics Data System (ADS)

Feenstra, Joel; Granstrom, Jon; Sodano, Henry

2008-04-01

Over the past few decades, the use of portable and wearable electronics has grown steadily. These devices are becoming increasingly more powerful, however, the gains that have been made in the device performance has resulted in the need for significantly higher power to operate the electronics. This issue has been further complicated due to the stagnate growth of battery technology over the past decade. In order to increase the life of these electronics, researchers have begun investigating methods of generating energy from ambient sources such that the life of the electronics can be prolonged. Recent developments in the field have led to the design of a number of mechanisms that can be used to generate electrical energy, from a variety of sources including thermal, solar, strain, inertia, etc. Many of these energy sources are available for use with humans, but their use must be carefully considered such that parasitic effects that could disrupt the user's gait or endurance are avoided. This study develops a novel energy harvesting backpack that can generate electrical energy from the differential forces between the wearer and the pack. The goal of this system is to make the energy harvesting device transparent to the wearer such that his or her endurance and dexterity is not compromised. This will be accomplished by replacing the strap buckle with a mechanically amplified piezoelectric stack actuator. Piezoelectric stack actuators have found little use in energy harvesting applications due to their high stiffness which makes straining the material difficult. This issue will be alleviated using a mechanically amplified stack which allows the relatively low forces generated by the pack to be transformed to high forces on the piezoelectric stack. This paper will develop a theoretical model of the piezoelectric buckle and perform experimental testing to validate the model accuracy and energy harvesting performance.

Figure Control of Lightweight Optical Structures

NASA Technical Reports Server (NTRS)

Main, John A.; Song, Haiping

2005-01-01

The goal of this paper is to demonstrate the use of fuzzy logic controllers in modifying the figure of a piezoceramic bimorph mirror. Non-contact electron actuation technology is used to actively control a bimorph mirror comprised two PZT-5H wafers by varying the electron flux and electron voltages. Due to electron blooming generated by the electron flux, it is difficult to develop an accurate control model for the bimorph mirror through theoretical analysis alone. The non-contact shape control system with electron flux blooming can be approximately described with a heuristic model based on experimental data. Two fuzzy logic feedback controllers are developed to control the shape of the bimorph mirror according to heuristic fuzzy inference rules generated from previous experimental results. Validation of the proposed fuzzy logic controllers is also discussed.

Comparative face-shear piezoelectric properties of soft and hard PZT ceramics

NASA Astrophysics Data System (ADS)

Miao, Hongchen; Chen, Xi; Cai, Hairong; Li, Faxin

2015-12-01

The face-shear ( d 36 ) mode may be the most practical shear mode in piezoelectrics, while theoretically this mode cannot appear in piezoelectric ceramics because of its transversally isotropic symmetry. Recently, we realized piezoelectric coefficient d 36 up to 206pC/N in soft PbZr1-xTixO3 (PZT) ceramics via ferroelastic domain engineering [H. C. Miao and F. X. Li, Appl. Phys. Lett. 107, 122902 (2015)]. In this work, we further realized the face-shear mode in both hard and soft PZT ceramics including PZT-4 (hard), PZT-51(soft), and PZT-5H (soft) and investigated the electric properties systematically. The resonance methods are derived to measure the d 36 coefficients using both square patches and narrow bar samples, and the obtained values are consistent with that measured by a modified d 33 meter previously. For all samples, the pure d 36 mode can only appear near the resonance frequency, and the coupled d 36 - d 31 mode dominates off resonance. It is found that both the piezoelectric coefficient d 36 and the electromechanical coupling factor k 36 of soft PZT ceramics (PZT-5H and PZT-51) are considerably larger than those of the hard PZT ceramics (PZT-4). The obtained d 36 of 160-275pC/N, k 36 ˜ 0.24, and the mechanical quality factor Q 36 of 60-90 in soft PZT ceramics are comparable with the corresponding properties of the d 31 mode sample. Therefore, the d 36 mode in modified soft PZT ceramics is more promising for industrial applications such as face-shear resonators and shear horizontal wave generators.

Optimal Control of Airfoil Flow Separation using Fluidic Excitation

NASA Astrophysics Data System (ADS)

Shahrabi, Arireza F.

This thesis deals with the control of flow separation around a symmetric airfoils with the aid of multiple synthetic jet actuators (SJAs). CFD simulation methods have been implemented to uncover the flow separation regimes and associated properties such as frequencies and momentum ratio. In the first part of the study, the SJA was studied thoroughly. Large Eddy Simulations (LES) were performed for one individual cavity; the time history of SJA of the outlet velocity profile and the net momentum imparted to the flow were analyzed. The studied SJA is asymmetrical and operates with the aid of a piezoelectric (PZT) ceramic circular plate actuator. A three-dimensional mesh for the computational domain of the SJA and the surrounding volume was developed and was used to evaluate the details of the airflow conditions inside the SJA as well as at the outlet. The vibration of the PZT ceramic actuator was used as a boundary condition in the computational model to drive the SJA. Particular attention was given to developing a predictive model of the SJA outlet velocity. Results showed that the SJA velocity output is correlated to the PZT ceramic plate vibration, especially for the first frequency mode. SJAs are a particular class of zero net mass flux (ZNMF) fluidic devices with net imparted momentum to the flow. The net momentum imparted to the flow in the separated region is such that positive enhancement during AFC operations is achieved. Flows around the NACA 0015 airfoil were simulated for a range of operating conditions. Attention was given to the active open and closed loop control solutions for an airfoil with SJA at different angles of attack and flap angles. A large number of simulations using RANS & LES models were performed to study the effects of the momentum ratio (Cμ) in the range of 0 to 11% and of the non-dimensional frequency, F+, in the range of 0 to 2 for the control of flow separation at a practical angle of attack and flap angle. The optimum value of Cμ as well as F+ were evaluated and discussed. The computational model predictions showed good agreement with the experimental data. It was observed that different angles of attack and flap angles have different requirements for the minimum value of the momentum coefficient, Cμ, in order for the SJA to be effective for control of separation. It was also found that the variation of F + noticeably affects the lift and drag forces acting on the airfoil. The optimum values of parameters during open loop control simulations have been applied in order to introduce the optimal open loop control outcome. An innovative approach has been implemented to formulate optimal frequencies and momentum ratios of vortex shedding which depends on angle of attack and static pressure of the separation zone in the upper chord. Optimal open loop results have been compared with the optimal closed loop results. Cumulative case studies in the matter of angle of attacks, flap angles, Re, Cμ and F+ provide a convincing collection of evidence to the following conclusion. An improvement of a direct closed loop control was demonstrated, and an analytical formula describing the properties of a separated flow and vortex shedding was proposed. Best AFC solutions are offered by providing optimal frequencies and momentum ratios at a variety of flow conditions.

Remote Sensing and Quantization of Analog Sensors

NASA Technical Reports Server (NTRS)

Strauss, Karl F.

2011-01-01

This method enables sensing and quantization of analog strain gauges. By manufacturing a piezoelectric sensor stack in parallel (physical) with a piezoelectric actuator stack, the capacitance of the sensor stack varies in exact proportion to the exertion applied by the actuator stack. This, in turn, varies the output frequency of the local sensor oscillator. The output, F(sub out), is fed to a phase detector, which is driven by a stable reference, F(sub ref). The output of the phase detector is a square waveform, D(sub out), whose duty cycle, t(sub W), varies in exact proportion according to whether F(sub out) is higher or lower than F(sub ref). In this design, should F(sub out) be precisely equal to F(sub ref), then the waveform has an exact 50/50 duty cycle. The waveform, D(sub out), is of generally very low frequency suitable for safe transmission over long distances without corruption. The active portion of the waveform, t(sub W), gates a remotely located counter, which is driven by a stable oscillator (source) of such frequency as to give sufficient digitization of t(sub W) to the resolution required by the application. The advantage to this scheme is that it negates the most-common, present method of sending either very low level signals (viz. direct output from the sensors) across great distances (anything over one-half meter) or the need to transmit widely varying higher frequencies over significant distances thereby eliminating interference [both in terms of beat frequency generation and in-situ EMI (electromagnetic interference)] caused by ineffective shielding. It also results in a significant reduction in shielding mass.

Top-down Approach for the Direct Synthesis, Patterning, and Operation of Artificial Micromuscles on Flexible Substrates.

PubMed

Maziz, Ali; Plesse, Cédric; Soyer, Caroline; Cattan, Eric; Vidal, Frédéric

2016-01-27

Recent progress in the field of microsystems on flexible substrates raises the need for alternatives to the stiffness of classical actuation technologies. This paper reports a top-down process to microfabricate soft conducting polymer actuators on substrates on which they ultimately operate. The bending microactuators were fabricated by sequentially stacking layers using a layer polymerization by layer polymerization of conducting polymer electrodes and a solid polymer electrolyte. Standalone microbeams thinner than 10 μm were fabricated on SU-8 substrates associated with a bottom gold electrical contact. The operation of microactuators was demonstrated in air and at low voltage (±4 V).

Microelectromechanical mirrors and electrically-programmable diffraction gratings based on two-stage actuation

DOEpatents

Allen, James J.; Sinclair, Michael B.; Dohner, Jeffrey L.

2005-11-22

A microelectromechanical (MEM) device for redirecting incident light is disclosed. The MEM device utilizes a pair of electrostatic actuators formed one above the other from different stacked and interconnected layers of polysilicon to move or tilt an overlying light-reflective plate (i.e. a mirror) to provide a reflected component of the incident light which can be shifted in phase or propagation angle. The MEM device, which utilizes leveraged bending to provide a relatively-large vertical displacement up to several microns for the light-reflective plate, has applications for forming an electrically-programmable diffraction grating (i.e. a polychromator) or a micromirror array.

A flexible, high-performance magnetoelectric heterostructure of (001) oriented Pb(Zr0.52Ti0.48)O3 film grown on Ni foil

NASA Astrophysics Data System (ADS)

Palneedi, Haribabu; Yeo, Hong Goo; Hwang, Geon-Tae; Annapureddy, Venkateswarlu; Kim, Jong-Woo; Choi, Jong-Jin; Trolier-McKinstry, Susan; Ryu, Jungho

2017-09-01

In this study, a flexible magnetoelectric (ME) heterostructure of PZT/Ni was fabricated by depositing a (001) oriented Pb(Zr0.52Ti0.48)O3 (PZT) film on a thin, flexible Ni foil buffered with LaNiO3/HfO2. Excellent ferroelectric properties and large ME voltage coefficient of 3.2 V/cmṡOe were realized from the PZT/Ni heterostructure. The PZT/Ni composite's high performance was attributed to strong texturing of the PZT film, coupled with the compressive stress in the piezoelectric film. Besides, reduced substrate clamping in the PZT film due to the film on the foil structure and strong interfacial bonding in the PZT/LaNiO3/HfO2/Ni heterostructure could also have contributed to the high ME performance of PZT/Ni.

Adjustability of resonance frequency by external magnetic field and bias electric field of sandwich magnetoelectric PZT/NFO/PZT composites

NASA Astrophysics Data System (ADS)

Xu, Ling-Fang; Feng, Xing; Sun, Kang; Liang, Ze-Yu; Xu, Qian; Liang, Jia-Yu; Yang, Chang-Ping

2017-07-01

Sandwich magnetoelectric composites of PZT/NFO/PZT (PNP) have been prepared by laminating PZT5, NiFe2O4, and PZT5 ceramics in turn with polyvinyl alcohol (PVA) paste. A systematic study of structural, magnetic and ferroelectric properties is undertaken. Structural studies carried out by X-ray diffraction indicate formation of cubic perovskite phase of PZT5 ceramic and cubic spinel phase of NiFe2O4 ceramic. As increasing the content of PZT5 phase, ferroelectric loops and magnetic loops of PNP composites showed increasing remnant electric polarizations and decreasing remnant magnetic moments separately. Both external magnetic fields and bias voltages could regulate the basal radial resonance frequency of the composites, which should be originated with the transformation and coupling of the stress between the piezoelectric phase and magnetostrictive phase. Such magnetoelectric composite provides great opportunities for electrostatically tunable devices.

Fabrication and etching processes of silicon-based PZT thin films

NASA Astrophysics Data System (ADS)

Zhao, Hongjin; Liu, Yanxiang; Liu, Jianshe; Ren, Tian-Ling; Liu, Li-Tian; Li, Zhijian

2001-09-01

Lead-zirconate-titanate (PZT) thin films on silicon were prepared by a sol-gel method. Phase characterization and crystal orientation of the films were investigated by x-ray diffraction analysis (XRD). It was shown that the PZT thin films had a perfect perovskite structure after annealed at a low temperature of 600 degrees C. PZT thin films were chemically etched using HCl/HF solution through typical semiconductor lithographic process, and the etching condition was optimized. The scanning electron microscopy results indicated that the PZT thin film etching problem was well solved for the applications of PZT thin film devices.

Effect of Polymer Matrix on the Structure and Electric Properties of Piezoelectric Lead Zirconatetitanate/Polymer Composites

PubMed Central

Li, Rui; Zhou, Jun; Liu, Hujun; Pei, Jianzhong

2017-01-01

Piezoelectric lead zirconatetitanate (PZT)/polymer composites were prepared by two typical polymer matrixes using the hot-press method. The micromorphology, microstructure, dielectric properties, and piezoelectric properties of the PZT/polymer composites were characterized and investigated. The results showed that when the condition of frequency is 103 Hz, the dielectric and piezoelectric properties of PZT/poly(vinylidene fluoride) were both better than that of PZT/polyvinyl chloride (PVC). When the volume fraction of PZT was 50%, PZT/PVDF prepared by the hot-press method had better comprehensive electric property. PMID:28805730

Comparison of the Thermal Degradation of Heavily Nb-Doped and Normal PZT Thin Films.

PubMed

Yang, Jeong-Suong; Kang, YunSung; Kang, Inyoung; Lim, SeungMo; Shin, Seung-Joo; Lee, JungWon; Hur, Kang Heon

2017-03-01

The degradation of niobium-doped lead zirconate titanate (PZT) and two types of PZT thin films were investigated. Undoped PZT, two-step PZT, and heavily Nb-doped PZT (PNZT) around the morphotropic phase boundary were in situ deposited under optimum condition by RF-magnetron sputtering. All 2- [Formula: see text]-thick films had dense perovskite columnar grain structure and self-polarized (100) dominant orientation. PZT thin films were deposited on Pt/TiO x bottom electrode on Si wafer, and PNZT thin film was on Ir/TiW electrode with the help of orientation control. Sputtered PZT films formed on microelectromechanical system (MEMS) gyroscope and the degradation rates were compared at different temperatures. PNZT showed the best resistance to the thermal degradation, followed by two-step PZT. To clarify the effect of oxygen vacancies on the degradation of the film at high temperature, photoluminescence measurement was conducted, which confirmed that oxygen vacancy rate was the lowest in heavy PNZT. Nb-doping PZT thin films suppressed the oxygen deficit and made high imprint with self-polarization. This defect distribution and high internal field allowed PNZT thin film to make the piezoelectric sensors more stable and reliable at high temperature, such as reflow process of MEMS packaging.

Method of Fabricating a Composite Apparatus

NASA Technical Reports Server (NTRS)

Wilkie, W. Keats (Inventor); Bryant, Robert G. (Inventor); Fox, Robert L. (Inventor); Hellbaum, Richard F. (Inventor); High, James W. (Inventor); Jalink, Antony, Jr. (Inventor)

2007-01-01

A method for fabricating a piezoelectric macro-fiber composite actuator comprises making a piezoelectric fiber sheet by providing a plurality of wafers of piezoelectric material, bonding the wafers together with an adhesive material to from a stack of alternating layers of piezoelectric material and adhesive material, and cutting through the stack in a direction substantially parallel to the thickness of the stack and across the alternating layers of piezoelectric material and adhesive material to provide at least one piezoelectric fiber sheet having two sides comprising a plurality of piezoelectric fibers in juxtaposition to the adhesive material. The method further comprises bonding two electrically conductive films to the two sides of the piezoelectric fiber sheet. At least one conductive film has first and second conductive patterns formed thereon which are electrically isolated from one another and in electrical contact with the piezoelectric fiber sheet.

Experimental evaluation of an adaptive Joule–Thomson cooling system including silicon-microfabricated heat exchanger and microvalve components

PubMed Central

Zhu, Weibin; Park, Jong M.; White, Michael J.; Nellis, Gregory F.; Gianchandani, Yogesh B.

2011-01-01

This article reports the evaluation of a Joule–Thomson (JT) cooling system that combines two custom micromachined components—a Si/glass-stack recuperative heat exchanger and a piezoelectrically actuated expansion microvalve. With the microvalve controlling the flow rate, this system can modulate cooling to accommodate varying refrigeration loads. The perforated plate Si/glass heat exchanger is fabricated with a stack of alternating silicon plates and Pyrex glass spacers. The microvalve utilizes a lead zirconate titanate actuator to push a Si micromachined valve seat against a glass plate, thus modulating the flow passing through the gap between the valve seat and the glass plate. The fabricated heat exchanger has a footprint of 1×1 cm2 and a length of 35 mm. The size of the micromachined piezoelectrically actuated valve is about 1×1×1 cm3. In JT cooling tests, the temperature of the system was successfully controlled by adjusting the input voltage of the microvalve. When the valve was fully opened (at an input voltage of −30 V), the system cooled down to a temperature as low as 254.5 K at 430 kPa pressure difference between inlet and outlet at steady state and 234 K at 710 kPa in a transient state. The system provided cooling powers of 75 mW at 255 K and 150 mW at 258 K. Parasitic heat loads at 255 K are estimated at approximately 700 mW. PMID:21552354

Synthesis, Structural, Optical and Dielectric Properties of Nanostructured 0-3 PZT/PVDF Composite Films.

PubMed

Revathi, S; Kennedy, L John; Basha, S K Khadheer; Padmanabhan, R

2018-07-01

Nanostructured PbZr0.52Ti0.48O3 (PZT) powder was synthesized at 500 °C-800 °C using sol-gel route. X-ray diffraction and Rietveld analysis confirmed the formation of perovskite structure. The sample heat treated at 800 °C alone showed the formation of morphotropic phase boundary with coexistence of tetragonal and rhombohedral phase. The PZT powder and PVDF were used in 0-3 connectivity to form the PZT/PVDF composite film using solvent casting method. The composite films containing 10%, 50%, 70% and 80% volume fraction of PZT in PVDF were fabricated. The XRD spectra validated that the PZT structure remains unaltered in the composites and was not affected by the presence of PVDF. The scanning electron microscopy images show good degree of dispersion of PZT in PVDF matrix and the formation of pores at higher PZT loading. The quantitative analysis of elements and their composition were confirmed from energy dispersive X-ray analysis. The optical band gap of the PVDF film is 3.3 eV and the band gap decreased with increase in volume fraction of PZT fillers. The FTIR spectra showed the bands corresponding to different phases of PVDF (α, β, γ) and perovskite phase of PZT. The thermogravimetric analysis showed that PZT/PVDF composite films showed better thermal stability than the pure PVDF film and hydrophobicity. The dielectric constant was measured at frequency ranging from 1 Hz to 6 MHz and for temperature ranging from room temperature to 150 °C. The composite with 50% PZT filler loading shows the maximum dielectric constant at the studied frequency and temperature range with flexibility.

Performance of magnetoelectric PZT/Ni multiferroic system for energy harvesting application

NASA Astrophysics Data System (ADS)

Gupta, Reema; Tomar, Monika; Kumar, Ashok; Gupta, Vinay

2017-03-01

Magnetoelectric (ME) coefficient of Lead Zirconium Titanate (PZT) thin films has been probed for possible energy harvesting applications. Single phase PZT thin films have been deposited on nickel substrate (PZT/Ni) using pulsed laser deposition (PLD) technique. The effect of PLD process parameters on the ME coupling coefficient in the prepared systems has been investigated. The as grown PZT films on Ni substrate were found to be polycrystalline with improved ferroelectric and ferromagnetic properties. The electrical switching behavior of the PZT thin films were verified using capacitance voltage measurements, where well defined butterfly loops were obtained. The ME coupling coefficient was estimated to be in the range of 94.5 V cm-1 Oe-1-130.5 V cm-1 Oe-1 for PZT/Ni system, which is large enough for harnessing electromagnetic energy for subsequent applications.

Rise Time Reduction of Thermal Actuators Operated in Air and Water through Optimized Pre-Shaped Open-Loop Driving.

PubMed

Larsen, T; Doll, J C; Loizeau, F; Hosseini, N; Peng, A W; Fantner, G; Ricci, A J; Pruitt, B L

2017-01-01

Electrothermal actuators have many advantages compared to other actuators used in Micro-Electro-Mechanical Systems (MEMS). They are simple to design, easy to fabricate and provide large displacements at low voltages. Low voltages enable less stringent passivation requirements for operation in liquid. Despite these advantages, thermal actuation is typically limited to a few kHz bandwidth when using step inputs due to its intrinsic thermal time constant. However, the use of pre-shaped input signals offers a route for reducing the rise time of these actuators by orders of magnitude. We started with an electrothermally actuated cantilever having an initial 10-90% rise time of 85 μs in air and 234 μs in water for a standard open-loop step input. We experimentally characterized the linearity and frequency response of the cantilever when operated in air and water, allowing us to obtain transfer functions for the two cases. We used these transfer functions, along with functions describing desired reduced rise-time system responses, to numerically simulate the required input signals. Using these pre-shaped input signals, we improved the open-loop 10-90% rise time from 85 μs to 3 μs in air and from 234 μs to 5 μs in water, an improvement by a factor of 28 and 47, respectively. Using this simple control strategy for MEMS electrothermal actuators makes them an attractive alternative to other high speed micromechanical actuators such as piezoelectric stacks or electrostatic comb structures which are more complex to design, fabricate, or operate.

Pyroelectric response of lead zirconate titanate thin films on silicon: Effect of thermal stresses

NASA Astrophysics Data System (ADS)

Kesim, M. T.; Zhang, J.; Trolier-McKinstry, S.; Mantese, J. V.; Whatmore, R. W.; Alpay, S. P.

2013-11-01

Ferroelectric lead zirconate titanate [Pb(ZrxTi1-xO)3, (PZT x:1-x)] has received considerable interest for applications related to uncooled infrared devices due to its large pyroelectric figures of merit near room temperature, and the fact that such devices are inherently ac coupled, allowing for simplified image post processing. For ferroelectric films made by industry-standard deposition techniques, stresses develop in the PZT layer upon cooling from the processing/growth temperature due to thermal mismatch between the film and the substrate. In this study, we use a non-linear thermodynamic model to investigate the pyroelectric properties of polycrystalline PZT thin films for five different compositions (PZT 40:60, PZT 30:70, PZT 20:80, PZT 10:90, PZT 0:100) on silicon as a function of processing temperature (25-800 °C). It is shown that the in-plane thermal stresses in PZT thin films alter the out-of-plane polarization and the ferroelectric phase transformation temperature, with profound effect on the pyroelectric properties. PZT 30:70 is found to have the largest pyroelectric coefficient (0.042 μC cm-2 °C-1, comparable to bulk values) at a growth temperature of 550 °C; typical to what is currently used for many deposition processes. Our results indicate that it is possible to optimize the pyroelectric response of PZT thin films by adjusting the Ti composition and the processing temperature, thereby, enabling the tailoring of material properties for optimization relative to a specific deposition process.

Dynamic Modelling of Embeddable Piezoceramic Transducers

PubMed Central

Li, Xu; Li, Hongnan; Wang, Zhijie; Song, Gangbing

2017-01-01

Embedded Lead Zirconate Titanate (PZT) transducers have been widely used in research related to monitoring the health status of concrete structures. This paper presents a dynamic model of an embeddable PZT transducer with a waterproof layer and a protecting layer. The proposed model is verified by finite-element method (FEM). Based on the proposed model, the factors influencing the dynamic property of the embeddable PZT transducers, which include the material and thickness of the protecting layer, the material and thickness of the waterproof layer, and the thickness of the PZT, are analyzed. These analyses are further validated by a series of dynamic stress transfer experiments on embeddable PZT transducers. The results show that the excitation frequency can significantly affect the stress transfer of the PZT transducer in terms of both amplitude and signal phase. The natural frequency in the poling direction for the PZT transducer is affected by the material properties and the thickness of the waterproof and protecting layers. The studies in this paper will provide a scientific basis to design embeddable PZT transducers with special functions. PMID:29206150

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.

PubMed

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining

2017-01-28

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.

Improving the contact resistance at low force using gold coated carbon nanotube surfaces

NASA Astrophysics Data System (ADS)

McBride, J. W.; Yunus, E. M.; Spearing, S. M.

2010-04-01

Investigations to determine the electrical contact performance under repeated cycles at low force conditions for carbon-nanotube (CNT) coated surfaces were performed. The surfaces under investigation consisted of multi-walled CNT synthesized on a silicon substrate and coated with a gold film. These planar surfaces were mounted on the tip of a PZT actuator and contacted with a plated Au hemispherical probe. The dynamic applied force used was 1 mN. The contact resistance (Rc) of these surfaces was investigated with the applied force and with repeated loading cycles performed for stability testing. The surfaces were compared with a reference Au-Au contact under the same experimental conditions. This initial study shows the potential for the application of gold coated CNT surfaces as an interface in low force electrical contact applications.

Transient Characteristics of a Fluidic Device for Circulatory Jet Flow.

PubMed

Phan, Hoa Thanh; Dinh, Thien Xuan; Bui, Phong Nhu; Dau, Van Thanh

2018-03-13

In this paper, we report on the design, simulation, and experimental analysis of a miniaturized device that can generate multiple circulated jet flows. The device is actuated by a lead zirconate titanate (PZT) diaphragm. The flows in the device were studied using three-dimensional transient numerical simulation with the programmable open source OpenFOAM and was comparable to the experimental result. Each flow is verified by two hotwires mounted at two positions inside each consisting chamber. The experiment confirmed that the flow was successfully created, and it demonstrated good agreement with the simulation. In addition, a prospective application of the device as an angular rate sensor is also demonstrated. The device is robust, is minimal in size, and can contribute to the development of multi-axis fluidic inertial sensors, fluidic amplifiers, gas mixing, coupling, and analysis.

Transient Characteristics of a Fluidic Device for Circulatory Jet Flow

PubMed Central

Phan, Hoa Thanh; Dinh, Thien Xuan; Bui, Phong Nhu

2018-01-01

In this paper, we report on the design, simulation, and experimental analysis of a miniaturized device that can generate multiple circulated jet flows. The device is actuated by a lead zirconate titanate (PZT) diaphragm. The flows in the device were studied using three-dimensional transient numerical simulation with the programmable open source OpenFOAM and was comparable to the experimental result. Each flow is verified by two hotwires mounted at two positions inside each consisting chamber. The experiment confirmed that the flow was successfully created, and it demonstrated good agreement with the simulation. In addition, a prospective application of the device as an angular rate sensor is also demonstrated. The device is robust, is minimal in size, and can contribute to the development of multi-axis fluidic inertial sensors, fluidic amplifiers, gas mixing, coupling, and analysis. PMID:29534014

Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor

PubMed Central

Chen, Tao; Wang, Yaqiong; Liu, Huicong; Yang, Zhan; Wang, Pengbo; Sun, Lining

2017-01-01

Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system. PMID:28134854

Lattice strain induced multiferroicity in PZT-CFO particulate composite

NASA Astrophysics Data System (ADS)

Pradhan, Lagen Kumar; Pandey, Rabichandra; Kumar, Rajnish; Kar, Manoranjan

2018-02-01

Lead Zirconate Titanate [Pb(Zr0.52Ti0.48)O3/PZT] and Cobalt Ferrite [CoFe2O4/CFO] based multiferroic composites [(1-x)PZT-(x)CFO] with (x = 0.10-0.40) have been prepared to study its magnetoelectric (ME) and multiferroic properties. X-ray diffraction method along with the Rietveld refinement technique reveals that the crystal symmetries corresponding to PZT and CFO exist independently in the composites. The effect of interfacial strain on lattice distortion in PZT has been observed. It is well correlated with the magnetoelectric coupling of the composites. Dispersion behavior of dielectric constant with frequency can be explained by the modified Debye model. Different relaxation phenomena have been observed in PZT-CFO particulate composites. The ferroelectric properties of composites decrease with the increase in percentage of CFO in the composite. Both saturation (Ms) and remanent (Mr) magnetization increase with the increase in CFO content in the composite. The maximum ME coupling was found to be 1.339 pC/cm2 Oe for the composition (0.80) PZT-(0.20) CFO at the application of maximum magnetic field of 50 Oe. The multiferroic properties in CFO-PZT can be explained by the lattice strain at the CFO-PZT interfaces.

Comparison of effective transverse piezoelectric coefficients e31,f of Pb(Zr,Ti)O3 thin films between direct and converse piezoelectric effects

NASA Astrophysics Data System (ADS)

Tsujiura, Yuichi; Kawabe, Saneyuki; Kurokawa, Fumiya; Hida, Hirotaka; Kanno, Isaku

2015-10-01

We evaluated the effective transverse piezoelectric coefficients (e31,f) of Pb(Zr,Ti)O3 (PZT) thin films from both the direct and converse piezoelectric effects of unimorph cantilevers. (001) preferentially oriented polycrystalline PZT thin films and (001)/(100) epitaxial PZT thin films were deposited on (111)Pt/Ti/Si and (001)Pt/MgO substrates, respectively, by rf-magnetron sputtering, and their piezoelectric responses owing to intrinsic and extrinsic effects were examined. The direct and converse |e31,f| values of the polycrystalline PZT thin films were calculated as 6.4 and 11.5-15.0 C/m2, respectively, whereas those of the epitaxial PZT thin films were calculated as 3.4 and 4.6-4.8 C/m2, respectively. The large |e31,f| of the converse piezoelectric property of the polycrystalline PZT thin films is attributed to extrinsic piezoelectric effects. Furthermore, the polycrystalline PZT thin films show a clear nonlinear piezoelectric contribution, which is the same as the Rayleigh-like behavior reported in bulk PZT. In contrast, the epitaxial PZT thin films on the MgO substrate show a piezoelectric response owing to the intrinsic and linear extrinsic effects, and no nonlinear contribution was observed.

Phase and electrical properties of PZT thin films embedded with CuO nano-particles by a hybrid sol-gel route

NASA Astrophysics Data System (ADS)

Sreesattabud, Tharathip; Gibbons, Brady J.; Watcharapasorn, Anucha; Jiansirisomboon, Sukanda

2013-07-01

Pb(Zr0.52Ti0.48)O3 or PZT thin films embedded with CuO nano-particles were successfully prepared by a hybrid sol-gel process. In this process, CuO (0, 0.1, 0.2, 0.3, 0.4, 0.5 and 1 wt. %) nanopowder was suspended in an organometallic solution of PZT, and then coated on platinised silicon substrate using a spin-coating technique. The influence of CuO nano-particles' dispersion on the phase of PZT thin films was investigated. XRD results showed a perovskite phase in all films. At the CuO concentration of 0.4-1 wt. %, a second phase was observed. The addition of CuO nano-particles affected the orientation of PZT thin films. The addition was also found to reduce the ferroelectric properties of PZT thin films. However, at 0.2 wt. % CuO concentration, the film exhibited good ferroelectric properties similar to those of PZT films. In addition, the fatigue retention properties of the PZT/CuO system was observed, and it showed 14% fatigue at 108 switching bipolar pulse cycles while the fatigue in PZT thin films was found to be 17% at the same switching bipolar pulse cycles.

Generalized constitutive equations for piezo-actuated compliant mechanism

NASA Astrophysics Data System (ADS)

Cao, Junyi; Ling, Mingxiang; Inman, Daniel J.; Lin, Jin

2016-09-01

This paper formulates analytical models to describe the static displacement and force interactions between generic serial-parallel compliant mechanisms and their loads by employing the matrix method. In keeping with the familiar piezoelectric constitutive equations, the generalized constitutive equations of compliant mechanism represent the input-output displacement and force relations in the form of a generalized Hooke’s law and as analytical functions of physical parameters. Also significantly, a new model of output displacement for compliant mechanism interacting with piezo-stacks and elastic loads is deduced based on the generalized constitutive equations. Some original findings differing from the well-known constitutive performance of piezo-stacks are also given. The feasibility of the proposed models is confirmed by finite element analysis and by experiments under various elastic loads. The analytical models can be an insightful tool for predicting and optimizing the performance of a wide class of compliant mechanisms that simultaneously consider the influence of loads and piezo-stacks.

Peri-Elastodynamic Simulations of Guided Ultrasonic Waves in Plate-Like Structure with Surface Mounted PZT.

PubMed

Patra, Subir; Ahmed, Hossain; Banerjee, Sourav

2018-01-18

Peridynamic based elastodynamic computation tool named Peri-elastodynamics is proposed herein to simulate the three-dimensional (3D) Lamb wave modes in materials for the first time. Peri-elastodynamics is a nonlocal meshless approach which is a scale-independent generalized technique to visualize the acoustic and ultrasonic waves in plate-like structure, micro-electro-mechanical systems (MEMS) and nanodevices for their respective characterization. In this article, the characteristics of the fundamental Lamb wave modes are simulated in a sample plate-like structure. Lamb wave modes are generated using a surface mounted piezoelectric (PZT) transducer which is actuated from the top surface. The proposed generalized Peri-elastodynamics method is not only capable of simulating two dimensional (2D) in plane wave under plane strain condition formulated previously but also capable of accurately simulating the out of plane Symmetric and Antisymmetric Lamb wave modes in plate like structures in 3D. For structural health monitoring (SHM) of plate-like structures and nondestructive evaluation (NDE) of MEMS devices, it is necessary to simulate the 3D wave-damage interaction scenarios and visualize the different wave features due to damages. Hence, in addition, to simulating the guided ultrasonic wave modes in pristine material, Lamb waves were also simulated in a damaged plate. The accuracy of the proposed technique is verified by comparing the modes generated in the plate and the mode shapes across the thickness of the plate with theoretical wave analysis.

Mechanically robust microfluidics and bulk wave acoustics to sort microparticles

NASA Astrophysics Data System (ADS)

Dauson, Erin R.; Gregory, Kelvin B.; Greve, David W.; Healy, Gregory P.; Oppenheim, Irving J.

2016-04-01

Sorting microparticles (or cells, or bacteria) is significant for scientific, medical and industrial purposes. Research groups have used lithium niobate SAW devices to produce standing waves, and then to align microparticles at the node lines in polydimethylsiloxane (PDMS, silicone) microfluidic channels. The "tilted angle" (skewed) configuration is a recent breakthrough producing particle trajectories that cross multiple node lines, making it practical to sort particles. However, lithium niobate wafers and PDMS microfluidic channels are not mechanically robust. We demonstrate "tilted angle" microparticle sorting in novel devices that are robust, rapidly prototyped, and manufacturable. We form our microfluidic system in a rigid polymethyl methacrylate (PMMA, acrylic) prism, sandwiched by lead-zirconium-titanate (PZT) wafers, operating in through-thickness mode with inertial backing, that produce standing bulk waves. The overall configuration is compact and mechanically robust, and actuating PZT wafers in through-thickness mode is highly efficient. Moving to this novel configuration introduced new acoustics questions involving internal reflections, but we show experimental images confirming the intended nodal geometry. Microparticles in "tilted angle" devices display undulating trajectories, where deviation from the straight path increases with particle diameter and with excitation voltage to create the mechanism by which particles are sorted. We show a simplified analytical model by which a "phase space" is constructed to characterize effective particle sorting, and we compare our experimental data to the predictions from that simplified model; precise correlation is not expected and is not observed, but the important physical trends from the model are paralleled in the measured particle trajectories.

Dielectric Elastomers for Fluidic and Biomedical Applications

NASA Astrophysics Data System (ADS)

McCoul, David James

Dielectric elastomers have demonstrated tremendous potential as high-strain electromechanical transducers for a myriad of novel applications across all engineering disciplines. Because their soft, viscoelastic mechanical properties are similar to those of living tissues, dielectric elastomers have garnered a strong foothold in a plethora of biomedical and biomimetic applications. Dielectric elastomers consist of a sheet of stretched rubber, or elastomer, coated on both sides with compliant electrode materials; application of a voltage generates an electrostatic pressure that deforms the elastomer. They can function as soft generators, sensors, or actuators, and this last function is the focus of this dissertation. Many design configurations are possible, such as stacks, minimum energy structures, interpenetrating polymer networks, shape memory dielectric elastomers, and others; dielectric elastomers are already being applied to many fields of biomedicine. The first part of the original research presented in this dissertation details a PDMS microfluidic system paired with a dielectric elastomer stack actuator of anisotropically prestrained VHB(TM) 4910 (3M(TM)) and single-walled carbon nanotubes. These electroactive microfluidic devices demonstrated active increases in microchannel width when 3 and 4 kV were applied. Fluorescence microscopy also indicated an accompanying increase in channel depth with actuation. The cross-sectional area strains at 3 and 4 kV were approximately 2.9% and 7.4%, respectively. The device was then interfaced with a syringe pump, and the pressure was measured upstream. Linear pressure-flow plots were developed, which showed decreasing fluidic resistance with actuation, from 0.192 psi/(microL/min) at 0 kV, to 0.160 and 0.157 psi/(microL/min) at 3 and 4 kV, respectively. This corresponds to an ~18% drop in fluidic resistance at 4 kV. Active de-clogging was tested in situ with the device by introducing ~50 microm diameter PDMS microbeads and other smaller particulate debris into the system. After a channel blockage was confirmed, three actuation attempts successfully cleared the blockage. Further tests indicated that the device were biocompatible with HeLa cells at 3 kV. To our knowledge this is the first pairing of dielectric elastomers with microfluidics in a non-electroosmotic context. Applications may include adaptive microfilters, micro-peristaltic pumps, and reduced-complexity lab-on-a-chip devices. Dielectric elastomers can also be adapted to manipulate fluidic systems on a larger scale. The second part of the dissertation research reports a novel low-profile, biomimetic dielectric elastomer tubular actuator capable of actively controlling hydraulic flow. The tubular actuator has been established as a reliable tunable valve, pinching a secondary silicone tube completely shut in the absence of a fluidic pressure bias or voltage, offering a high degree of resistance against fluidic flow, and able to open and completely remove this resistance to flow with an applied low power actuation voltage. The system demonstrates a rise in pressure of ~3.0 kPa when the dielectric elastomer valve is in the passive, unactuated state, and there is a quadratic fall in this pressure with increasing actuation voltage, until ~0 kPa is reached at 2.4 kV. The device is reliable for at least 2,000 actuation cycles for voltages at or below 2.2 kV. Furthermore, modeling of the actuator and fluidic system yields results consistent with the observed experimental dependence of intrasystem pressure on input flow rate, actuator prestretch, and actuation voltage. To our knowledge, this is the first actuator of its type that can control fluid flow by directly actuating the walls of a tube. Potential applications may include an implantable artificial sphincter, part of a peristaltic pump, or a computerized valve for fluidic or pneumatic control. The final part of the dissertation presents a novel dielectric elastomer band with integrated rigid elements for the treatment of chronic acid reflux disorders. This dielectric elastomer ring actuator consists of a two-layer stack of prestretched VHB(TM) 4905 with SWCNT electrodes. Its transverse prestretch was maintained by selective rigidification of the VHB(TM) using a UV-curable, solution-processable polymer network. The actuator exhibited a maximum vertical (circumferential) actuation strain of 25% at 3.4 kV in an 24.5 g weighted isotonic setup. It also exhibited the required passive force of 0.25 N and showed a maximum force drop of 0.11 N at 3.32 kV during isometric tests at 4.5 cm. Modeling was performed to determine the prestretches necessary to achieve maximum strain while simultaneously exerting the force of 0.25 N, which corresponds to a required pinching pressure of 3.35 kPa. Modeling also determined the spacing between and number of rigid elements required. The theoretical model curves were adjusted to account for the passive rigid elements, as well as for the addition of margins; the resulting plots agrees well with experiment. The performance of the DE band is comparable to that of living muscle, and this is the first application of dielectric elastomer actuators in the design of a medical implant for the treatment of gastrointestinal disorders. Related applications that could result from this technology are very low-profile linear peristaltic pumps, artificial intestines, an artificial urethra, and artificial blood vessels.

Acoustic wave transmission through piezoelectric structured materials.

PubMed

Lam, M; Le Clézio, E; Amorín, H; Algueró, M; Holc, Janez; Kosec, Marija; Hladky-Hennion, A C; Feuillard, G

2009-05-01

This paper deals with the transmission of acoustic waves through multilayered piezoelectric materials. It is modeled in an octet formalism via the hybrid matrix of the structure. The theoretical evolution with the angle and frequency of the transmission coefficients of ultrasonic plane waves propagating through a partially depoled PZT plate is compared to finite element calculations showing that both methods are in very good agreement. The model is then used to study a periodic stack of 0.65 PMN-0.35 PT/0.90 PMN-0.10 PT layers. The transmission spectra are interpreted in terms of a dispersive behavior of the critical angles of longitudinal and transverse waves, and band gap structures are analysed. Transmission measurements confirm the theoretical calculations and deliver an experimental validation of the model.

Use of PZT's for adaptive control of Fabry-Perot etalon plate figure

NASA Technical Reports Server (NTRS)

Skinner, WIlbert; Niciejewski, R.

2005-01-01

A Fabry Perot etalon, consisting of two spaced and reflective glass flats, provides the mechanism by which high resolution spectroscopy may be performed over narrow spectral regions. Space based applications include direct measurements of Doppler shifts of airglow absorption and emission features and the Doppler broadening of spectral lines. The technique requires a high degree of parallelism between the two flats to be maintained through harsh launch conditions. Monitoring and adjusting the plate figure by illuminating the Fabry Perot interferometer with a suitable monochromatic source may be performed on orbit to actively control of the parallelism of the flats. This report describes the use of such a technique in a laboratory environment applied to a piezo-electric stack attached to the center of a Fabry Perot etalon.

Diaphragm Pump With Resonant Piezoelectric Drive

NASA Technical Reports Server (NTRS)

Izenson, Michael G.; Kline-Schoder, Robert J.; Shimko, Martin A.

2007-01-01

A diaphragm pump driven by a piezoelectric actuator is undergoing development. This pump is intended to be a prototype of lightweight, highly reliable pumps for circulating cooling liquids in protective garments and high-power electronic circuits, and perhaps for some medical applications. The pump would be highly reliable because it would contain no sliding seals or bearings that could wear, the only parts subject to wear would be two check valves, and the diaphragm and other flexing parts could be designed, by use of proven methods, for extremely long life. Because the pump would be capable of a large volumetric flow rate and would have only a small dead volume, its operation would not be disrupted by ingestion of gas, and it could be started reliably under all conditions. The prior art includes a number piezoelectrically actuated diaphragm pumps. Because of the smallness of the motions of piezoelectric actuators (typical maximum strains only about 0.001), the volumetric flow rates of those pumps are much too small for typical cooling applications. In the pump now undergoing development, mechanical resonance would be utilized to amplify the motion generated by the piezoelectric actuator and thereby multiply the volumetric flow rate. The prime mover in this pump would be a stack of piezoelectric ceramic actuators, one end of which would be connected to a spring that would be part of a spring-and-mass resonator structure. The mass part of the resonator structure would include the pump diaphragm (see Figure 1). Contraction of the spring would draw the diaphragm to the left, causing the volume of the fluid chamber to increase and thereby causing fluid to flow into the chamber. Subsequent expansion of the spring would push the diaphragm to the right, causing the volume of the fluid chamber to decrease, and thereby expelling fluid from the chamber. The fluid would enter and leave the chamber through check valves. The piezoelectric stack would be driven electrically to make it oscillate at the resonance frequency of the spring and- mass structure. This frequency could be made high enough (of the order of 400 Hz) that the masses of all components could be made conveniently small. The resonance would amplify the relatively small motion of the piezoelectric stack (a stroke of the order of 10 m) to a diaphragm stroke of the order of 0.5 mm. The exact amplification factor would depend on the rate of damping of oscillations; this, in turn, would depend on details of design and operation, including (but not limited to) the desired pressure rise and volumetric flow rate. In order to obtain resonance with large displacement, the damping rate must be low enough that the energy imparted to the pumped fluid on each stroke is much less than the kinetic and potential energy exchanged between the mass and spring during each cycle of oscillation. To minimize the power demand of the pump, a highly efficient drive circuit would be used to excite the piezoelectric stack. This circuit (see Figure 2) would amount to a special-purpose regenerative, switching power supply that would operate in a power-source mode during the part of an oscillation cycle when the excitation waveform was positive and in a power-recovery mode during the part of the cycle when the excitation waveform was negative. The circuit would include a voltage-boosting dc-to-dc converter that would convert between a supply potential of 24 Vdc and the high voltage needed to drive the piezoelectric stack. Because of the power-recovery feature, the circuit would consume little power. It should be possible to build the circuit as a compact unit, using readily available components.

Piezoelectric ceramic (PZT) modulates axonal guidance growth of rat cortical neurons via RhoA, Rac1, and Cdc42 pathways.

PubMed

Wen, Jianqiang; Liu, Meili

2014-03-01

Electrical stimulation is critical for axonal connection, which can stimulate axonal migration and deformation to promote axonal growth in the nervous system. Netrin-1, an axonal guidance cue, can also promote axonal guidance growth, but the molecular mechanism of axonal guidance growth under indirect electric stimulation is still unknown. We investigated the molecular mechanism of axonal guidance growth under piezoelectric ceramic lead zirconate titanate (PZT) stimulation in the primary cultured cortical neurons. PZT induced marked axonal elongation. Moreover, PZT activated the excitatory postsynaptic currents (EPSCs) by increasing the frequency and amplitude of EPSCs of the cortical neurons in patch clamp assay. PZT downregulated the expression of Netrin-1 and its receptor Deleted in Colorectal Cancer (DCC). Rho GTPase signaling is involved in interactions of Netrin-1 and DCC. PZT activated RhoA. Dramatic decrease of Cdc42 and Rac1 was also observed after PZT treatment. RhoA inhibitor Clostridium botulinum C3 exoenzyme (C3-Exo) prevented the PZT-induced downregulation of Netrin-1 and DCC. We suggest that PZT can promote axonal guidance growth by downregulation of Netrin-1 and DCC to mediate axonal repulsive responses via the Rho GTPase signaling pathway. Obviously, piezoelectric materials may provide a new approach for axonal recovery and be beneficial for clinical therapy in the future.

Flexoelectricity in PZT Nanoribbons and Biomembranes

DTIC Science & Technology

2015-01-09

Flexoelectricity in PZT Nanoribbons and Biomembranes The objective of this grant was to study flexoelectric phenomena in solids and in biomembranes...Flexoelectricity in PZT Nanoribbons and Biomembranes Report Title The objective of this grant was to study flexoelectric phenomena in solids and...producing PZT nanoribbons for energy harvesters. (a) Papers published in peer-reviewed journals (N/A for none) Enter List of papers submitted or

Piezoelectric and mechanical properties of fatigue resistant, self-healing PZT-ionomer composites

NASA Astrophysics Data System (ADS)

James, N. K.; Lafont, U.; van der Zwaag, S.; Groen, W. A.

2014-05-01

Piezoelectric ceramic-polymer composites with 0-3 connectivity were fabricated using lead zirconium titanate (PZT) powder dispersed in an ionomer (Zn ionomer) and its reference ethylene methacrylic acid copolymer (EMAA) polymer matrix. The PZT-Zn ionomer and PZT-EMAA composites were prepared by melt extrusion followed by hot pressing. The effects of poling conditions such as temperature, time and electric field on the piezoelectric properties of the composites were investigated. The experimentally observed piezoelectric charge coefficient and dielectric constant of the composites were compared with theoretical models. The results show that PZT-Zn ionomer composites have better piezoelectric properties compared to PZT-EMAA composites. The static and fatigue properties of the composites were investigated. The PZT-Zn ionomer composites were found to have excellent fatigue resistance even at strain levels of 4%. Due to the self-healing capabilities of the ionomer matrix, the loss of piezoelectric properties after high strain tensile cyclic loading could be partially recovered by thermal healing.

Polarization fatigue in ferroelectric Pb(Zr0.52Ti0.48)O3-SrBi2Nb2O9 ceramics

NASA Astrophysics Data System (ADS)

Namsar, Orapim; Pojprapai, Soodkhet; Watcharapasorn, Anucha; Jiansirisomboon, Sukanda

2015-09-01

Ferroelectric fatigue induced by cyclic electric loading of the (1- x)PZT- xSBN ceramics (0.1 ≤ x ≤ 0.3) have been investigated in comparison with pure PZT and SBN ceramics. The results showed that pure PZT ceramic possessed severe polarization fatigue after long bipolar switching pulses. This was mainly attributed to the appearance of microstructural damage at the near-electrode regions. Whereas, pure SBN ceramic exhibited no fatigue at least up to 1 × 106 switching cycles. The fatigue-free behavior of SBN ceramics was due primarily to weak domain wall pinning. PZT-SBN ceramics showed less polarization fatigue up to 1 × 106 switching cycles than pure PZT. This could be attributed to their low oxygen vacancy concentration. Therefore, this new ceramic PZT-SBN system seems to be an alternative material for replacing PZT in ferroelectric memory applications. [Figure not available: see fulltext.

Measurement of deformation and frequency response characteristic of PZT tube in tunable fiber laser with short period based on coherent laser beam

NASA Astrophysics Data System (ADS)

Lai, Zhi; Zeng, Xiaodong; Fan, Zhaojin; Xu, Zhichen

2016-09-01

The parameters of light source in synthetic aperture ladar (SAL) is very important to both the design of system and the signal processing algorithm. As the light source in the SAL, the fiber laser use PZT (piezoelectric ceramics) tube stretching the fiber Bragg grating in order to tune the laser frequency. So it is necessary to obtain the deformation and frequency response of PZT tube driven by saw-tooth voltage of different periods. Accordingly, the homodyne detection is used to measure the girth variation of PZT tube. Meanwhile, the frequency response of PZT tube can be viewed with the homodyne signal. The results from measuring a PZT tube show that the method can work well.

Fabrication and comparison of PMN-PT single crystal, PZT and PZT-based 1-3 composite ultrasonic transducers for NDE applications.

PubMed

Kim, Ki-Bok; Hsu, David K; Ahn, Bongyoung; Kim, Young-Gil; Barnard, Daniel J

2010-08-01

This paper describes fabrication and comparison of PMN-PT single crystal, PZT, and PZT-based 1-3 composite ultrasonic transducers for NDE applications. As a front matching layer between test material (Austenite stainless steel, SUS316) and piezoelectric materials, alumina ceramics was selected. The appropriate acoustic impedance of the backing materials for each transducer was determined based on the results of KLM model simulation. Prototype ultrasonic transducers with the center frequencies of approximately 2.25 and 5MHz for contact measurement were fabricated and compared to each other. The PMN-PT single crystal ultrasonic transducer shows considerably improved performance in sensitivity over the PZT and PZT-based 1-3 composite ultrasonic transducers. Copyright (c) 2010 Elsevier B.V. All rights reserved.

Optimization of PZT Thin Film Crystalline Orientation Through Optimization of TiO2/Pt Templates

DTIC Science & Technology

2011-01-01

with 90% textured volume fraction, which is expected to improve electrical properties of the PZT films. 15. SUBJECT TERMS Sputter film, Pt...INTENTIONALLY LEFT BLANK. 1 1. Introduction A wide variety of the physical properties of materials ...device fabrication. Because the Pt electrode crystallographic texture acts as a template for PZT film growth, the properties of ferroelectric PZT

Piezoelectric devices for vibration suppression: Modeling and application to a truss structure

NASA Technical Reports Server (NTRS)

Won, Chin C.; Sparks, Dean W., Jr.; Belvin, W. Keith; Sulla, Jeff L.

1993-01-01

For a space structure assembled from truss members, an effective way to control the structure may be to replace the regular truss elements by active members. The active members play the role of load carrying elements as well as actuators. A piezo strut, made of a stack of piezoceramics, may be an ideal active member to be integrated into a truss space structure. An electrically driven piezo strut generates a pair of forces, and is considered as a two-point actuator in contrast to a one-point actuator such as a thruster or a shaker. To achieve good structural vibration control, sensing signals compatible to the control actuators are desirable. A strain gage or a piezo film with proper signal conditioning to measure member strain or strain rate, respectively, are ideal control sensors for use with a piezo actuator. The Phase 0 CSI Evolutionary Model (CEM) at NASA Langley Research Center used cold air thrusters as actuators to control both rigid body motions and flexible body vibrations. For the Phase 1 and 2 CEM, it is proposed to use piezo struts to control the flexible modes and thrusters to control the rigid body modes. A tenbay truss structure with active piezo struts is built to study the modeling, controller designs, and experimental issues. In this paper, the tenbay structure with piezo active members is modelled using an energy method approach. Decentralized and centralized control schemes are designed and implemented, and preliminary analytical and experimental results are presented.

Ferroelectric devices using lead zirconate titanate (PZT) nanoparticles.

PubMed

Paik, Young Hun; Kojori, Hossein Shokri; Kim, Sung Jin

2016-02-19

We successfully demonstrate the synthesis of lead zirconate titanate nanoparticles (PZT NPs) and a ferroelectric device using the synthesized PZT NPs. The crystalline structure and the size of the nanocrystals are studied using x-ray diffraction and transmission electron microscopy, respectively. We observe <100 nm of PZT NPs and this result matches dynamic light scattering measurements. A solution-based low-temperature process is used to fabricate PZT NP-based devices on an indium tin oxide substrate. The fabricated ferroelectric devices are characterized using various optical and electrical measurements and we verify ferroelectric properties including ferroelectric hysteresis and the ferroelectric photovoltaic effect. Our approach enables low-temperature solution-based processes that could be used for various applications. To the best of our knowledge, this low-temperature solution processed ferroelectric device using PZT NPs is the first successful demonstration of its kind.

Ferroelectric devices using lead zirconate titanate (PZT) nanoparticles

NASA Astrophysics Data System (ADS)

Paik, Young Hun; Shokri Kojori, Hossein; Kim, Sung Jin

2016-02-01

We successfully demonstrate the synthesis of lead zirconate titanate nanoparticles (PZT NPs) and a ferroelectric device using the synthesized PZT NPs. The crystalline structure and the size of the nanocrystals are studied using x-ray diffraction and transmission electron microscopy, respectively. We observe <100 nm of PZT NPs and this result matches dynamic light scattering measurements. A solution-based low-temperature process is used to fabricate PZT NP-based devices on an indium tin oxide substrate. The fabricated ferroelectric devices are characterized using various optical and electrical measurements and we verify ferroelectric properties including ferroelectric hysteresis and the ferroelectric photovoltaic effect. Our approach enables low-temperature solution-based processes that could be used for various applications. To the best of our knowledge, this low-temperature solution processed ferroelectric device using PZT NPs is the first successful demonstration of its kind.

Improving fatigue resistance of Pb(Zr,Ti)O3 thin films by using PbZrO3 buffer layers

NASA Astrophysics Data System (ADS)

Mensur Alkoy, Ebru; Uchiyama, Kiyoshi; Shiosaki, Tadashi; Alkoy, Sedat

2006-05-01

Ferroelectric Pb(Zr0.52Ti0.48)O3 (PZT) thin films with PbZrO3 (PZ) buffer layers were prepared on Pt(111)/Ti/SiO2/Si(100) substrates using a hybrid rf magnetron sputtering and sol-gel process. Texture of PZT films was found to depend on Pb content of PZ buffer layers. Buffered PZT films displayed comparable ferroelectric properties (2Pr=38-53 μC/cm2,2Ec=136-170 kV/cm) with unbuffered PZT. Asymmetric leakage current and fatigue behavior with superior fatigue resistance was observed in PZ buffered PZT compared to unbuffered films. PZ buffer layers were found to affect crystallization and texture of PZT, and act as a capacitive interface layer possibly blocking charge injection from electrodes.

Enhancement of fatigue endurance in ferroelectric PZT ceramic by the addition of bismuth layered SBT

NASA Astrophysics Data System (ADS)

Namsar, O.; Pojprapai, S.; Watcharapasorn, A.; Jiansirisomboon, S.

2014-10-01

Electrical fatigue properties of (1-x)PZT-xSBT ceramics (x = 0-1.0 weight fraction) were characterized. It was found that pure PZT ceramic had severe polarization fatigue. This was mainly attributed to an occurrence of the macroscopic cracks at near-electrode regions. On the contrary, pure SBT ceramic exhibited excellent fatigue resistance, which was attributed primarily to weak domain wall pinning. As small amount of SBT (0.1 ≤ x ≤ 0.3) was added into PZT, a small reduction of remanent polarization after fatigue process was observed. This demonstrated that these ceramics had high stability during the repeated domain switching due to their low oxygen vacancy concentration. Therefore, these results suggested that this new ceramic PZT-SBT system seemed to be an alternative material for replacing pure PZT in ferroelectric memory applications.

Characterization of Bi and Fe co-doped PZT capacitors for FeRAM.

PubMed

Cross, Jeffrey S; Kim, Seung-Hyun; Wada, Satoshi; Chatterjee, Abhijit

2010-08-01

Ferroelectric random access memory (FeRAM) has been in mass production for over 15 years. Higher polarization ferroelectric materials are needed for future devices which can operate above about 100 °C. With this goal in mind, co-doping of thin Pb(Zr 40 ,Ti 60 )O 3 (PZT) films with 1 at.% Bi and 1 at.% Fe was examined in order to enhance the ferroelectric properties as well as characterize the doped material. The XRD patterns of PZT-5% BiFeO 3 (BF) and PZT 140-nm thick films showed (111) orientation on (111) platinized Si wafers and a 30 °C increase in the tetragonal to cubic phase transition temperature, often called the Curie temperature, from 350 to 380 °C with co-doping, indicating that Bi and Fe are substituting into the PZT lattice. Raman spectra revealed decreased band intensity with Bi and Fe co-doping of PZT compared to PZT. Polarization hysteresis loops show similar values of remanent polarization, but square-shaped voltage pulse-measured net polarization values of PZT-BF were higher and showed higher endurance to repeated cycling up to 10 10 cycles. It is proposed that Bi and Fe are both in the +3 oxidation state and substituting into the perovskite A and B sites, respectively. Substitution of Bi and Fe into the PZT lattice likely creates defect dipoles, which increase the net polarization when measured by the short voltage pulse positive-up-negative-down (PUND) method.

Sensitivity of PZT Impedance Sensors for Damage Detection of Concrete Structures.

PubMed

Yang, Yaowen; Hu, Yuhang; Lu, Yong

2008-01-21

Piezoelectric ceramic Lead Zirconate Titanate (PZT) based electro-mechanicalimpedance (EMI) technique for structural health monitoring (SHM) has been successfullyapplied to various engineering systems. However, fundamental research work on thesensitivity of the PZT impedance sensors for damage detection is still in need. In thetraditional EMI method, the PZT electro-mechanical (EM) admittance (inverse of theimpedance) is used as damage indicator, which is difficult to specify the effect of damage onstructural properties. This paper uses the structural mechanical impedance (SMI) extractedfrom the PZT EM admittance signature as the damage indicator. A comparison study on thesensitivity of the EM admittance and the structural mechanical impedance to the damages ina concrete structure is conducted. Results show that the SMI is more sensitive to the damagethan the EM admittance thus a better indicator for damage detection. Furthermore, this paperproposes a dynamic system consisting of a number of single-degree-of-freedom elementswith mass, spring and damper components to model the SMI. A genetic algorithm isemployed to search for the optimal value of the unknown parameters in the dynamic system.An experiment is carried out on a two-storey concrete frame subjected to base vibrations thatsimulate earthquake. A number of PZT sensors are regularly arrayed and bonded to the framestructure to acquire PZT EM admittance signatures. The relationship between the damageindex and the distance of the PZT sensor from the damage is studied. Consequently, thesensitivity of the PZT sensors is discussed and their sensing region in concrete is derived.

Fabrication of piezoelectric ceramic fibers by extrusion of Pb(Zr, Ti)O3 powder and Pb(Zr, Ti)O3 sol mixture

NASA Astrophysics Data System (ADS)

Qiu, Jinhao; Tani, Junji; Kobayashi, Yoshimasa; Um, Tae Young; Takahashi, Hirofumi

2003-06-01

In this study, Pb(Zr, Ti)O3 (PZT) piezoelectric ceramic fibers were fabricated by extrusion from a mixture of PZT powder and PZT sol. The added PZT sol in this study played the role of a binder; the sol changed into crystalline PZT during sintering, and removal of additives before sintering was not required. To obtain the required PZT fibers, the sol viscosity adjustment condition, the mixture ratio of powder and sol for fiber extrusion, and the sintering condition for obtaining polycrystalline fibers were investigated. The PZT precursor solution was synthesized from lead acetate trihydrate, zirconium n-propoxide, and titanium isopropoxide by reflux at 120 °C for 3 h with 2-methoxyethanol. The appropriate adjustment of the spinnable sol was achieved by the addition of acetic acid to suppress the hydrolysis reaction and by curing the sol at 80 °C to promote the condensation of the sol. Green fibers with diameters of about 300µm were successfully extruded from the mixture of PZT powder and sol (powder:sol = 5- 8:1, molar ratio). The extruded fibers, sintered at 1200 °C, had a microstructure with 2- 6µm grains and had no pores or cracks. From the results of displacement behavior measurements, the PZT fibers fabricated by firing at 1200 °C in this study were considered to have the desired piezoelectric properties.

Characterization of Bi and Fe co-doped PZT capacitors for FeRAM

PubMed Central

Cross, Jeffrey S; Kim, Seung-Hyun; Wada, Satoshi; Chatterjee, Abhijit

2010-01-01

Ferroelectric random access memory (FeRAM) has been in mass production for over 15 years. Higher polarization ferroelectric materials are needed for future devices which can operate above about 100 °C. With this goal in mind, co-doping of thin Pb(Zr40,Ti60)O3 (PZT) films with 1 at.% Bi and 1 at.% Fe was examined in order to enhance the ferroelectric properties as well as characterize the doped material. The XRD patterns of PZT-5% BiFeO3 (BF) and PZT 140-nm thick films showed (111) orientation on (111) platinized Si wafers and a 30 °C increase in the tetragonal to cubic phase transition temperature, often called the Curie temperature, from 350 to 380 °C with co-doping, indicating that Bi and Fe are substituting into the PZT lattice. Raman spectra revealed decreased band intensity with Bi and Fe co-doping of PZT compared to PZT. Polarization hysteresis loops show similar values of remanent polarization, but square-shaped voltage pulse-measured net polarization values of PZT-BF were higher and showed higher endurance to repeated cycling up to 1010 cycles. It is proposed that Bi and Fe are both in the +3 oxidation state and substituting into the perovskite A and B sites, respectively. Substitution of Bi and Fe into the PZT lattice likely creates defect dipoles, which increase the net polarization when measured by the short voltage pulse positive-up-negative-down (PUND) method. PMID:27877349

Stronger multilayer acrylic dielectric elastomer actuators with silicone gel coatings

NASA Astrophysics Data System (ADS)

Lau, Gih-Keong; La, Thanh-Giang; Sheng-Wei Foong, Ervin; Shrestha, Milan

2016-12-01

Multilayer dielectric elastomer actuators (DEA) perform worst off than single-layer DEAs due to higher susceptibility to electro-thermal breakdown. This paper presents a hot-spot model to predict the electro-thermal breakdown field of DEAs and its dependence on thermal insulation. To inhibit the electrothermal breakdown, silicone gel coating was applied as barrier coating to multilayer acrylic DEA. The gel coating helps suppress the electro-thermally induced puncturing of DEA membrane at the hot spot. As a result, the gel-coated DEAs, in either a single layer or a multilayer stack, can produce 30% more isometric stress change as compared to those none-coated. These gel-coated acrylic DEAs show great potential to make stronger artificial muscles.

A novel in situ device based on a bionic piezoelectric actuator to study tensile and fatigue properties of bulk materials.

PubMed

Wang, Shupeng; Zhang, Zhihui; Ren, Luquan; Zhao, Hongwei; Liang, Yunhong; Zhu, Bing

2014-06-01

In this work, a miniaturized device based on a bionic piezoelectric actuator was developed to investigate the static tensile and dynamic fatigue properties of bulk materials. The device mainly consists of a bionic stepping piezoelectric actuator based on wedge block clamping, a pair of grippers, and a set of precise signal test system. Tensile and fatigue examinations share a set of driving system and a set of signal test system. In situ tensile and fatigue examinations under scanning electron microscope or metallographic microscope could be carried out due to the miniaturized dimensions of the device. The structure and working principle of the device were discussed and the effects of output difference between two piezoelectric stacks on the device were theoretically analyzed. The tensile and fatigue examinations on ordinary copper were carried out using this device and its feasibility was verified through the comparison tests with a commercial tensile examination instrument.

A novel in situ device based on a bionic piezoelectric actuator to study tensile and fatigue properties of bulk materials

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Shupeng; Zhang, Zhihui, E-mail: zhzh@jlu.edu.cn; Ren, Luquan

2014-06-15

In this work, a miniaturized device based on a bionic piezoelectric actuator was developed to investigate the static tensile and dynamic fatigue properties of bulk materials. The device mainly consists of a bionic stepping piezoelectric actuator based on wedge block clamping, a pair of grippers, and a set of precise signal test system. Tensile and fatigue examinations share a set of driving system and a set of signal test system. In situ tensile and fatigue examinations under scanning electron microscope or metallographic microscope could be carried out due to the miniaturized dimensions of the device. The structure and working principlemore » of the device were discussed and the effects of output difference between two piezoelectric stacks on the device were theoretically analyzed. The tensile and fatigue examinations on ordinary copper were carried out using this device and its feasibility was verified through the comparison tests with a commercial tensile examination instrument.« less

Fabrication and performance analysis of a DEA cuff designed for dry-suit applications

NASA Astrophysics Data System (ADS)

Ahmadi, S.; Camacho Mattos, A.; Barbazza, A.; Soleimani, M.; Boscariol, P.; Menon, C.

2013-03-01

A method for manufacturing a cylindrical dielectric elastomer actuator (DEA) is presented. The cylindrical DEA can be used in fabricating the cuff area of dry-suits where the garment is very tight and wearing the suit is difficult. When electrically actuated, the DEA expands radially and the suit can be worn more comfortably. In order to study the performance of the DEA, a customized testing setup was designed, and silicone-made cuff samples with different material stiffnesses were tested. Analytical and FEM modeling were considered to evaluate the experimental output. The results revealed that although the stiffness of the DEA material has a direct relationship with the radial constrictive pressure caused by mechanically stretching the DEA, it has a minor effect on the actuation pressure. It was also found that stacking multiple layers of the DEA to fabricate a laminated structure enabled the attainment of a desired variation of pressure required for the implementation of an electrically tunable cuff.

Experimental investigation of active rib stitch knitted architecture for flow control applications

NASA Astrophysics Data System (ADS)

Abel, Julianna M.; Mane, Poorna; Pascoe, Benjamin; Luntz, Jonathan; Brei, Diann

2010-04-01

Actively manipulating flow characteristics around the wing can enhance the high-lift capability and reduce drag; thereby, increasing fuel economy, improving maneuverability and operation over diverse flight conditions which enables longer, more varied missions. Active knits, a novel class of cellular structural smart material actuator architectures created by continuous, interlocked loops of stranded active material, produce distributed actuation that can actively manipulate the local surface of the aircraft wing to improve flow characteristics. Rib stitch active knits actuate normal to the surface, producing span-wise discrete periodic arrays that can withstand aerodynamic forces while supplying the necessary displacement for flow control. This paper presents a preliminary experimental investigation of the pressuredisplacement actuation performance capabilities of a rib stitch active knit based upon shape memory alloy (SMA) wire. SMA rib stitch prototypes in both individual form and in stacked and nestled architectures were experimentally tested for their quasi-static load-displacement characteristics, verifying the parallel and series relationships of the architectural configurations. The various configurations tested demonstrated the potential of active knits to generate the required level of distributed surface displacements while under aerodynamic level loads for various forms of flow control.

A Study on the Requirements for Fast Active Turbine Tip Clearance Control Systems

NASA Technical Reports Server (NTRS)

DeCastro, Jonathan A.; Melcher, Kevin J.

2004-01-01

This paper addresses the requirements of a control system for active turbine tip clearance control in a generic commercial turbofan engine through design and analysis. The control objective is to articulate the shroud in the high pressure turbine section in order to maintain a certain clearance set point given several possible engine transient events. The system must also exhibit reasonable robustness to modeling uncertainties and reasonable noise rejection properties. Two actuators were chosen to fulfill such a requirement, both of which possess different levels of technological readiness: electrohydraulic servovalves and piezoelectric stacks. Identification of design constraints, desired actuator parameters, and actuator limitations are addressed in depth; all of which are intimately tied with the hardware and controller design process. Analytical demonstrations of the performance and robustness characteristics of the two axisymmetric LQG clearance control systems are presented. Takeoff simulation results show that both actuators are capable of maintaining the clearance within acceptable bounds and demonstrate robustness to parameter uncertainty. The present model-based control strategy was employed to demonstrate the tradeoff between performance, control effort, and robustness and to implement optimal state estimation in a noisy engine environment with intent to eliminate ad hoc methods for designing reliable control systems.

Poly-SiGe MEMS actuators for adaptive optics

NASA Astrophysics Data System (ADS)

Lin, Blake C.; King, Tsu-Jae; Muller, Richard S.

2006-01-01

Many adaptive optics (AO) applications require mirror arrays with hundreds to thousands of segments, necessitating a CMOS-compatible MEMS process to integrate the mirrors with their driving electronics. This paper proposes a MEMS actuator that is fabricated using low-temperature polycrystalline silicon-germanium (poly-SiGe) surface-micromaching technology (total thermal budget is 6 hours at or below 425°C). The MEMS actuator consists of three flexures and a hexagonal platform, on which a micromirror is to be assembled. The flexures are made of single-layer poly-SiGe with stress gradient across thickness of the film, making them bend out-of-plane after sacrificial-layer release to create a large nominal gap. The platform, on the other hand, has an additional stress-balancing SiGe layer deposited on top, making the dual-layer stack stay flat after release. Using this process, we have successfully fabricated the MEMS actuator which is lifted 14.6 μm out-of-plane by 290-μm-long flexures. The 2-μm-thick hexagonal mirror-platform exhibits a strain gradient of -5.5×10 -5 μm -1 (equivalent to 18 mm radius-of-curvature), which would be further reduced once the micromirror is assembled.

PZT Active Frequency Based Wind Blade Fatigue to Failure Testing Results for Various Blade Designs

DTIC Science & Technology

2011-09-01

PZT Active Frequency Based Wind Blade Fatigue to Failure Testing Results for Various Blade Designs R. J. WERLINK...number. 1. REPORT DATE SEP 2011 2. REPORT TYPE N/A 3. DATES COVERED - 4. TITLE AND SUBTITLE PZT Active Frequency Based Wind Blade Fatigue ...18 Abstract: This paper summarizes NASA PZT Health Monitoring System results previously reported for 9 meter blade Fatigue loading to failure

Piezoelectric Sol-Gel Composite Film Fabrication by Stencil Printing.

PubMed

Kaneko, Tsukasa; Iwata, Kazuki; Kobayashi, Makiko

2015-09-01

Piezoelectric films using sol-gel composites could be useful as ultrasonic transducers in various industrial fields. For sol-gel composite film fabrication, the spray coating technique has been used often because of its adaptability for various substrates. However, the spray technique requires multiple spray coating processes and heating processes and this is an issue of concern, especially for on-site fabrication in controlled areas. Stencil printing has been developed to solve this issue because this method can be used to fabricate thick sol-gel composite films with one coating process. In this study, PbTiO3 (PT)/Pb(Zr,Ti)O3 (PZT) films, PZT/PZT films, and Bi4Ti3O12 (BiT)/PZT films were fabricated by stencil printing, and PT/ PZT films were also fabricated using the spray technique. After fabrication, a thermal cycle test was performed for the samples to compare their ultrasonic performance. The sensitivity and signal-to-noise-ratio (SNR) of the ultrasonic response of PT/PZT fabricated by stencil printing were equivalent to those of PT/PZT fabricated by the spray technique, and better than those of other samples between room temperature and 300°C. Therefore, PT/PZT films fabricated by stencil printing could be a good candidate for nondestructive testing (NDT) ultrasonic transducers from room temperature to 300°C.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Ci, Penghong; Liu, Guoxi; Dong, Shuxiang, E-mail: sxdong@pku.edu.cn

We report a strain-mediated electric field manipulation of permittivity in BaTiO{sub 3} (barium titanate, BT) ceramic by a Pb(Zr,Ti)O{sub 3} (PZT) bimorph. This BT/PZT heterostructure exhibited a relatively large permittivity tunability of BT up to ±10% in a wide frequency range under an electric field of ±4 kV/cm applied to the PZT bimorph. The permittivity tunability is attributed to the strain in BT produced by the PZT bimorph. Calculations of the relationship between permittivity and applied electric field were developed, and corresponded well with measurements. The BT/PZT heterostructure has potential for applications in broadband field tunable smart electronic devices.

A High-Performance Deformable Mirror with Integrated Driver ASIC for Space Based Active Optics

NASA Astrophysics Data System (ADS)

Shelton, Chris

Direct imaging of exoplanets is key to fully understanding these systems through spectroscopy and astrometry. The primary impediment to direct imaging of exoplanets is the extremely high brightness ratio between the planet and its parent star. Direct imaging requires a technique for contrast suppression, which include coronagraphs, and nulling interferometers. Deformable mirrors (DMs) are essential to both of these techniques. With space missions in mind, Microscale is developing a novel DM with direct integration of DM and its electronic control functions in a single small envelope. The Application Specific Integrated Circuit (ASIC) is key to the shrinking of the electronic control functions to a size compatible with direct integration with the DM. Through a NASA SBIR project, Microscale, with JPL oversight, has successfully demonstrated a unique deformable mirror (DM) driver ASIC prototype based on an ultra-low power switch architecture. Microscale calls this the Switch-Mode ASIC, or SM-ASIC, and has characterized it for a key set of performance parameters, and has tested its operation with a variety of actuator loads, such as piezo stack and unimorph, and over a wide temperature range. These tests show the SM-ASIC's capability of supporting active optics in correcting aberrations of a telescope in space. Microscale has also developed DMs to go with the SM-ASIC driver. The latest DM version produced uses small piezo stack elements in an 8x8 array, bonded to a novel silicon facesheet structure fabricated monolithically into a polished mirror on one side and mechanical linkage posts that connect to the piezoelectric stack actuators on the other. In this Supporting Technology proposal we propose to further develop the ASIC-DM and have assembled a very capable team to do so. It will be led by JPL, which has considerable expertise with DMs used in Adaptive Optics systems, with high-contrast imaging systems for exoplanet missions, and with designing DM driver electronics. On its part Microscale will continue its design and fabrication of the ASIC-DM combination. Both the SM-ASIC and the DM are currently at a Technology Readiness Level (TRL) of 3; the major goal of the proposed effort is to raise the TRL of the combined system to 4 by scaling up the array formats and by testing, characterizing, and operating multiple generations of the integrated DM-ASIC systems in a laboratory environment. We propose a three year effort, with these tasks: Year 1: Optimize the influence function of an 8x8 DM for active / adaptive optics, by modeling and fabricating different geometric parameters of the facesheet, with its mechanical linkage posts. Fabricate an SM-ASIC and an 8x8 piezo stack DM, and evaluate their performance. Characterize and optimize the integration processes to achieve a driver/DM combination that can support high contrast imaging of exoplanets. Test the control resolution of the ASIC in driving actuators using a commercial interferometer, to ensure the ASIC can command the piezo stack actuator to nanometer levels. The goal, by year three, is control to a small number of picometers; 10-20 pm (surface) may be a practical goal, while 5 pm is the ultimate goal. Year 2: Fabricate 16x16 piezo stack DMs and matching driver ASICS, and repeat Year 1 tasks with the larger format devices. Year 3: Fabricate 32x32 DMs and SM-ASICs, and repeat Year 1 tasks with the larger format devices. Fabricate versions of the 32x32 devices that can be formed into a 2x2 array, to make a composite 64x64 DM/driver. Fabricate such a composite 64x64 DM/ASIC and evaluate its performance.

Reliable bonding using indium-based solders

NASA Astrophysics Data System (ADS)

Cheong, Jongpil; Goyal, Abhijat; Tadigadapa, Srinivas; Rahn, Christopher

2004-01-01

Low temperature bonding techniques with high bond strengths and reliability are required for the fabrication and packaging of MEMS devices. Indium and indium-tin based bonding processes are explored for the fabrication of a flextensional MEMS actuator, which requires the integration of lead zirconate titanate (PZT) substrate with a silicon micromachined structure at low temperatures. The developed technique can be used either for wafer or chip level bonding. The lithographic steps used for the patterning and delineation of the seed layer limit the resolution of this technique. Using this technique, reliable bonds were achieved at a temperature of 200°C. The bonds yielded an average tensile strength of 5.41 MPa and 7.38 MPa for samples using indium and indium-tin alloy solders as the intermediate bonding layers respectively. The bonds (with line width of 100 microns) showed hermetic sealing capability of better than 10-11 mbar-l/s when tested using a commercial helium leak tester.

Reliable bonding using indium-based solders

NASA Astrophysics Data System (ADS)

Cheong, Jongpil; Goyal, Abhijat; Tadigadapa, Srinivas; Rahn, Christopher

2003-12-01

Low temperature bonding techniques with high bond strengths and reliability are required for the fabrication and packaging of MEMS devices. Indium and indium-tin based bonding processes are explored for the fabrication of a flextensional MEMS actuator, which requires the integration of lead zirconate titanate (PZT) substrate with a silicon micromachined structure at low temperatures. The developed technique can be used either for wafer or chip level bonding. The lithographic steps used for the patterning and delineation of the seed layer limit the resolution of this technique. Using this technique, reliable bonds were achieved at a temperature of 200°C. The bonds yielded an average tensile strength of 5.41 MPa and 7.38 MPa for samples using indium and indium-tin alloy solders as the intermediate bonding layers respectively. The bonds (with line width of 100 microns) showed hermetic sealing capability of better than 10-11 mbar-l/s when tested using a commercial helium leak tester.

Frequency-scanning interferometry using a time-varying Kalman filter for dynamic tracking measurements.

PubMed

Jia, Xingyu; Liu, Zhigang; Tao, Long; Deng, Zhongwen

2017-10-16

Frequency scanning interferometry (FSI) with a single external cavity diode laser (ECDL) and time-invariant Kalman filtering is an effective technique for measuring the distance of a dynamic target. However, due to the hysteresis of the piezoelectric ceramic transducer (PZT) actuator in the ECDL, the optical frequency sweeps of the ECDL exhibit different behaviors, depending on whether the frequency is increasing or decreasing. Consequently, the model parameters of Kalman filter appear time varying in each iteration, which produces state estimation errors with time-invariant filtering. To address this, in this paper, a time-varying Kalman filter is proposed to model the instantaneous movement of a target relative to the different optical frequency tuning durations of the ECDL. The combination of the FSI method with the time-varying Kalman filter was theoretically analyzed, and the simulation and experimental results show the proposed method greatly improves the performance of dynamic FSI measurements.

A standing wave linear ultrasonic motor operating in in-plane expanding and bending modes.

PubMed

Chen, Zhijiang; Li, Xiaotian; Ci, Penghong; Liu, Guoxi; Dong, Shuxiang

2015-03-01

A novel standing wave linear ultrasonic motor operating in in-plane expanding and bending modes was proposed in this study. The stator (or actuator) of the linear motor was made of a simple single Lead Zirconate Titanate (PZT) ceramic square plate (15 × 15 × 2 mm(3)) with a circular hole (D = 6.7 mm) in the center. The geometric parameters of the stator were computed with the finite element analysis to produce in-plane bi-mode standing wave vibration. The calculated results predicted that a driving tip attached at midpoint of one edge of the stator can produce two orthogonal, approximate straight-line trajectories, which can be used to move a slider in linear motion via frictional forces in forward or reverse direction. The investigations showed that the proposed linear motor can produce a six times higher power density than that of a previously reported square plate motor.

Effect of substrate bending on the piezoelectric measurement of PZT thin film

NASA Astrophysics Data System (ADS)

Xu, Xiaohui; Tang, Jianhong; He, Liangna

2009-05-01

Bonding conditions between PZT thin film and sample holder greatly affect the strain measurement of the PZT sample. The influence of various bonding conditions on the measured displacement were analyzed using finite element analysis (FEA). One-end fixed sample induces the maximum bending displacement. Experiments were performed on sol-gel derived PZT thin film. The voltage-displacement curve and "butterfly" loop were measured using laser Doppler method with phase detection. Experimental results agreed well with the simulated ones. The measured frequency dependence of piezoelectric response of PZT thin film indicated that, if the operating frequency was lower than 2 kHz, good bonding effect could be obtained when the entire back surface of the sample was glued to a rigid supporter using epoxy resin. A simple bonding model which considered the adhesives as a spring was used to estimate the frequency response of PZT thin film sample.

The influence of preferred orientation and poling temperature on the polarization switching current in PZT thin films

NASA Astrophysics Data System (ADS)

Xiao, Mi; Zhang, Weikang; Zhang, Zebin; Zhang, Ping; Lan, Kuibo

2017-07-01

In this paper, Pb(Zr0.52Ti0.48)O3 (PZT) thin films with different preferred orientation were prepared on platinized silicon substrates by a modified sol-gel method. Our results indicate that the polarization switching current in PZT thin films is dependent on preferred orientation and poling temperature. In our measurements, (111)-oriented PZT has a larger polarization switching current than randomly oriented PZT, and with the increase of the degree of (111) preferred orientation and the poling temperature, the polarization switching current gradually increase. Considering the contact of PZT thin film with electrodes, the space-charged limited conduction (SCLC) combined with domain switching mechanism may be responsible for such phenomena. By analyzing the conduction data, we found the interface-limited Schottky emission (ES) and bulk-limited Poole-Frenkel hopping (PF) are not suitable for our samples.

PMN-PT-PZT composite films for high frequency ultrasonic transducer applications.

PubMed

Hsu, Hsiu-Sheng; Benjauthrit, Vatcharee; Zheng, Fan; Chen, Rumin; Huang, Yuhong; Zhou, Qifa; Shung, K Kirk

2012-06-01

We have successfully fabricated x (0.65PMN-0.35PT)-(1 - x )PZT ( x PMN-PT-(1 - x )PZT), where x is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol-gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of x PMN-PT-(1 - x )PZT films show better ferroelectric properties. A representative 0.9PMN-PT-0.1PZT thick film transducer is built. It has 200 MHz center frequency with a -6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB.

PMN-PT–PZT composite films for high frequency ultrasonic transducer applications

PubMed Central

Hsu, Hsiu-Sheng; Benjauthrit, Vatcharee; Zheng, Fan; Chen, Rumin; Huang, Yuhong; Zhou, Qifa; Shung, K. Kirk

2013-01-01

We have successfully fabricated x(0.65PMN-0.35PT)–(1 − x)PZT (xPMN-PT–(1 − x)PZT), where x is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol–gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of xPMN-PT–(1 − x)PZT films show better ferroelectric properties. A representative 0.9PMN-PT–0.1PZT thick film transducer is built. It has 200 MHz center frequency with a −6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB. PMID:23750072

PVDF-PZT nanocomposite film based self-charging power cell.

PubMed

Zhang, Yan; Zhang, Yujing; Xue, Xinyu; Cui, Chunxiao; He, Bin; Nie, Yuxin; Deng, Ping; Lin Wang, Zhong

2014-03-14

A novel PVDF-PZT nanocomposite film has been proposed and used as a piezoseparator in self-charging power cells (SCPCs). The structure, composed of poly(vinylidene fluoride) (PVDF) and lead zirconate titanate (PZT), provides a high piezoelectric output, because PZT in this nanocomposite film can improve the piezopotential compared to the pure PVDF film. The SCPC based on this nanocomposite film can be efficiently charged up by the mechanical deformation in the absence of an external power source. The charge capacity of the PVDF-PZT nanocomposite film based SCPC in 240 s is ∼0.010 μA h, higher than that of a pure PVDF film based SCPC (∼0.004 μA h). This is the first demonstration of using PVDF-PZT nanocomposite film as a piezoseparator for SCPC, and is an important step for the practical applications of SCPC for harvesting and storing mechanical energy.

Design Parameters of a Miniaturized Piezoelectric Underwater Acoustic Transmitter

PubMed Central

Li, Huidong; Deng, Zhiqun Daniel; Yuan, Yong; Carlson, Thomas J.

2012-01-01

PZT ceramics have been widely used in underwater acoustic transducers. However, literature available discussing the design parameters of a miniaturized PZT-based low-duty-cycle transmitter is very limited. This paper discusses some of the design parameters—the backing material, driving voltage, PZT material type, power consumption and the transducer length of a miniaturized acoustic fish tag using a PZT tube. Four different types of PZT were evaluated with respect to the source level, energy consumption and bandwidth of the transducer. The effect of the tube length on the source level is discussed. The results demonstrate that ultralow-density closed-cell foam is the best backing material for the PZT tube. The Navy Type VI PZTs provide the best source level with relatively low energy consumption and that a low transducer capacitance is preferred for high efficiency. A 35% reduction in the transducer length results in 2 dB decrease in source level. PMID:23012534

Design parameters of a miniaturized piezoelectric underwater acoustic transmitter.

PubMed

Li, Huidong; Deng, Zhiqun Daniel; Yuan, Yong; Carlson, Thomas J

2012-01-01

PZT ceramics have been widely used in underwater acoustic transducers. However, literature available discussing the design parameters of a miniaturized PZT-based low-duty-cycle transmitter is very limited. This paper discusses some of the design parameters--the backing material, driving voltage, PZT material type, power consumption and the transducer length of a miniaturized acoustic fish tag using a PZT tube. Four different types of PZT were evaluated with respect to the source level, energy consumption and bandwidth of the transducer. The effect of the tube length on the source level is discussed. The results demonstrate that ultralow-density closed-cell foam is the best backing material for the PZT tube. The Navy Type VI PZTs provide the best source level with relatively low energy consumption and that a low transducer capacitance is preferred for high efficiency. A 35% reduction in the transducer length results in 2 dB decrease in source level.

Epitaxial growth of lead zirconium titanate thin films on Ag buffered Si substrates using rf sputtering

NASA Astrophysics Data System (ADS)

Wang, Chun; Laughlin, David E.; Kryder, Mark H.

2007-04-01

Epitaxial lead zirconium titanate (PZT) (001) thin films with a Pt bottom electrode were deposited by rf sputtering onto Si(001) single crystal substrates with a Ag buffer layer. Both PZT(20/80) and PZT(53/47) samples were shown to consist of a single perovskite phase and to have the (001) orientation. The orientation relationship was determined to be PZT(001)[110]‖Pt(001)[110]‖Ag(001)[110]‖Si(001)[110]. The microstructure of the multilayer was studied using transmission electron microscopy (TEM). The electron diffraction pattern confirmed the epitaxial relationship between each layer. The measured remanent polarization Pr and coercive field Ec of the PZT(20/80) thin film were 26μC /cm2 and 110kV/cm, respectively. For PZT(53/47), Pr was 10μC /cm2 and Ec was 80kV/cm.

Sensitivity of PZT Impedance Sensors for Damage Detection of Concrete Structures

PubMed Central

Yang, Yaowen; Hu, Yuhang; Lu, Yong

2008-01-01

Piezoelectric ceramic Lead Zirconate Titanate (PZT) based electro-mechanical impedance (EMI) technique for structural health monitoring (SHM) has been successfully applied to various engineering systems. However, fundamental research work on the sensitivity of the PZT impedance sensors for damage detection is still in need. In the traditional EMI method, the PZT electro-mechanical (EM) admittance (inverse of the impedance) is used as damage indicator, which is difficult to specify the effect of damage on structural properties. This paper uses the structural mechanical impedance (SMI) extracted from the PZT EM admittance signature as the damage indicator. A comparison study on the sensitivity of the EM admittance and the structural mechanical impedance to the damages in a concrete structure is conducted. Results show that the SMI is more sensitive to the damage than the EM admittance thus a better indicator for damage detection. Furthermore, this paper proposes a dynamic system consisting of a number of single-degree-of-freedom elements with mass, spring and damper components to model the SMI. A genetic algorithm is employed to search for the optimal value of the unknown parameters in the dynamic system. An experiment is carried out on a two-storey concrete frame subjected to base vibrations that simulate earthquake. A number of PZT sensors are regularly arrayed and bonded to the frame structure to acquire PZT EM admittance signatures. The relationship between the damage index and the distance of the PZT sensor from the damage is studied. Consequently, the sensitivity of the PZT sensors is discussed and their sensing region in concrete is derived. PMID:27879711

Low Fatigue in Epitaxial Pb(Zr0.2Ti0.8)O3 on Si Substrates with LaNiO3 Electrodes by RF Sputtering

NASA Astrophysics Data System (ADS)

Wang, Chun; Kryder, Mark H.

2009-09-01

Epitaxial PZT (001) thin films with a LaNiO3 bottom electrode were deposited by radio-frequency (RF) sputtering onto Si(001) single-crystal substrates with SrTiO3/TiN buffer layers. Pb(Zr0.2Ti0.8)O3 (PZT) samples were shown to consist of a single perovskite phase and to have an (001) orientation. The orientation relationship was determined to be PZT(001)[110]∥LaNiO3(001)[110]∥SrTiO3 (001)[110]∥TiN(001)[110]∥Si(001)[110]. Atomic force microscope (AFM) measurements showed the PZT films to have smooth surfaces with a roughness of 1.15 nm. The microstructure of the multilayer was studied using transmission electron microscopy (TEM). Electrical measurements were conducted using both Pt and LaNiO3 as top electrodes. The measured remanent polarization P r and coercive field E c of the PZT thin film with Pt top electrodes were 23 μC/cm2 and 75 kV/cm, and were 25 μC/cm2 and 60 kV/cm for the PZT film with LaNiO3 top electrodes. No obvious fatigue after 1010 switching cycles indicated good electrical endurance of the PZT films using LaNiO3 electrodes, compared with the PZT film with Pt top electrodes showing a significant polarization loss after 108 cycles. These PZT films with LaNiO3 electrodes could be potential recording media for probe-based high-density data storage.

Dynamics of thin-film piezoelectric microactuators with large vertical stroke subject to multi-axis coupling and fabrication asymmetries

NASA Astrophysics Data System (ADS)

Choi, Jongsoo; Wang, Thomas; Oldham, Kenn

2018-01-01

The high performance and small size of MEMS based scanners has allowed various optical imaging techniques to be realized in a small form factor. Many such devices are resonant scanners, and thus their linear and nonlinear dynamic behaviors have been studied in the past. Thin-film piezoelectric materials, in contrast, provide sufficient energy density to achieve both large static displacements and high-frequency resonance, but large deformation can in turn influence dynamic scanner behavior. This paper reports on the influence of very large stroke translation of a piezoelectric vertical actuator on its resonant behavior, which may not be otherwise explained fully by common causes of resonance shift such as beam stiffening or nonlinear forcing. To examine the change of structural compliance over the course of scanner motion, a model has been developed that includes internal forces from residual stress and the resultant additional multi-axis coupling among actuator leg structures. Like some preceding vertical scanning micro-actuators, the scanner of this work has four legs, with each leg featuring four serially connected thin-film PZT unimorphs that allow the scanner to generate larger than 400 µm of vertical displacement at 14 V DC. Using an excitation near one or more resonances, the input voltage can be lowered, and complementary multi-axis rotations can be also generated, but change of the resonant frequencies with scanner height needs to be understood to maximize scanner performance. The presented model well predicts the experimental observation of the decrease of the resonant frequencies of the scanner with the increase of a dc bias voltage. Also, the effects of the magnitude and uniformity of residual stress across the scanner structure on the natural frequencies have been studied.

Properties of PZT-Based Piezoelectric Ceramics Between -150 and 250 C

NASA Technical Reports Server (NTRS)

Hooker, Matthew W.

1998-01-01

The properties of three PZT-based piezoelectric ceramics and one PLZT electrostrictive ceramic were measured as a function of temperature. In this work, the dielectric, ferroelectric polarization versus electric field, and piezoelectric properties of PZT-4, PZT-5A, PZT-5H, and PLZT-9/65/35 were measured over a temperature range of -150 to 250 C. In addition to these measurements, the relative thermal expansion of each composition was measured from 25 to 600 C and the modulus of rupture of each material was measured at room temperature. This report describes the experimental results and compares and contrasts the properties of these materials with respect to their applicability to intelligent aerospace systems.

Highly-efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates.

PubMed

Park, Kwi-Il; Son, Jung Hwan; Hwang, Geon-Tae; Jeong, Chang Kyu; Ryu, Jungho; Koo, Min; Choi, Insung; Lee, Seung Hyun; Byun, Myunghwan; Wang, Zhong Lin; Lee, Keon Jae

2014-04-23

A highly-efficient, flexible piezoelectric PZT thin film nanogenerator is demonstrated using a laser lift-off (LLO) process. The PZT thin film nanogenerator harvests the highest output performance of ∼200 V and ∼150 μA·cm(-2) from regular bending motions. Furthermore, power sources generated from a PZT thin film nanogenerator, driven by slight human finger bending motions, successfully operate over 100 LEDs. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Phase and Texture Evolution in Chemically Derived PZT Thin Films on Pt Substrates

DTIC Science & Technology

2014-09-01

function of heating rate. The FWHM of the Ill PZT texture components is sim 2978 Journal of the American Ceramic Society Mhin et al. Vol. 97, No. 9...Z39.18 ABSTRACT Phase and Texture Evolution in Chemically Derived PZT Thin Films on Pt Substrates Report Title The crystallization of lead zirconate...phase influencing texture evolution. The results suggest that PZT nucleates directly on Pt, which explains the observation of a more highly oriented

Design, Fabrication, Characterization and Modeling of Integrated Functional Materials

DTIC Science & Technology

2012-10-01

films. The successful optimization of the PZT thin film growth parameters allowed us to set the stage for doping PZT with rare earth elements...Lanthanum (La)-doped PZT (PLZT) (where Pb2+ is substituted by La3+), has a dramatic enhancement in the piezoelectric properties. There have been only a...few recent reports on the growth of La- PZT films. However, most of the reports were based on chemical routes such as metal organic decomposition

Bio-Inspired Stretchable Network-Based Intelligent Composites

DTIC Science & Technology

2012-05-03

on par with that of lead zirconate titanate ( PZT ). This shows that the BSPT piezo-transducer has the potential to function in ultrasonic situations as...well as the PZTs typically used As a final test, the full network was used, with the same data acquisition computer, designed for PZT - based networks...ality of BSPT in SHM systems. These experiments indicate that BSPT has function- ality on par with PZT -5A and can simply replace the PZT in existing

Standing wave brass-PZT square tubular ultrasonic motor.

PubMed

Park, Soonho; He, Siyuan

2012-09-01

This paper reports a standing wave brass-PZT tubular ultrasonic motor. The motor is composed of a brass square tube with two teeth on each tube end. Four PZT plates are attached to the outside walls of the brass tube. The motor requires only one driving signal to excite vibration in a single bending mode to generate reciprocating diagonal trajectories of teeth on the brass tube ends, which drive the motor to rotate. Bi-directional rotation is achieved by exciting different pairs of PZT plates to switch the bending vibration direction. Through using the brass-PZT tube structure, the motor can take high magnitude vibration to achieve a high output power in comparison to PZT tube based ultrasonic motors. Prototypes are fabricated and tested. The dimension of the brass-PZT tube is 3.975mm×3.975mm×16mm. Measured performance is a no-load speed of >1000RPM, a stall torque of 370μNm and a maximum output power of 16 mW when a sinusoidal driving voltage of 50V is applied. The working frequencies of the motor are 46,050Hz (clockwise) and 46,200Hz (counter-clockwise). Copyright © 2012. Published by Elsevier B.V.

A spherically-shaped PZT thin film ultrasonic transducer with an acoustic impedance gradient matching layer based on a micromachined periodically structured flexible substrate.

PubMed

Feng, Guo-Hua; Liu, Wei-Fan

2013-10-09

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a theoretical analysis of the device design and a micromachining technique to produce the novel transducer. Based on a design of a lead titanium zirconium (PZT) micropillar array, the constructed gradient acoustic matching layer has much better acoustic transmission efficiency within a 20-50 MHz operation range compared to a matching layer with a conventional quarter-wavelength thickness Parylene deposition. To construct the transducer, periodic microcavities are built on a flexible copper sheet, and then the sheet forms a designed curvature with a ball shaping. After PZT slurry deposition, the constructed PZT micropillar array is released onto a curved thin PZT layer. Following Parylene conformal coating on the processed PZT micropillars, the PZT micropillars and the surrounding Parylene comprise a matching layer with gradient acoustic impedance. By using the proposed technique, the fabricated transducer achieves a center frequency of 26 MHz and a -6 dB bandwidth of approximately 65%.

Passive Vibration Damping Materials: Piezoelectric Ceramics Composites for Vibration Damping Applications

DTIC Science & Technology

1993-02-01

CBu)4 j 80% solution In 1-butanol, titanium S mable PZT. and NuOW=a isopropoxide (Ti(OPf1 )4], niobium ethoxide (Nb(OC 2 H5) 5 i, ýand cadrrtni qa...fibers(5). We have chosen the sol-gel route to produce PZT fiber of less that 30Mm diameter by spin-drawing PZT solutions at proper viscosity. The first...dielectric constant and electromechanical coupling by controlling grain growth and grain boundary conditions. PZT precursor solutions in the form of viscous

Synthesis of Multifunctional Materials

DTIC Science & Technology

2006-09-01

temperatures of 600’C and higher, whereas layers grown at lower temperature contained PbO inclusions. Growth of Pb(ZrxTi1 ..)0 3 ( PZT ) films by molecular...beam epitaxy was demonstrated for the first time. Single-crystal, single-phase PZT films were grown on (001) SrTiO3 substrates at a growth temperature...compounds of the PZT system, PbTiO 3 and PbZrO 3, and three-dimensional growth mode for PZT films of intermediate compositions. Epitaxial growth of PbO

Enhanced pyroelectric and piezoelectric properties of PZT with aligned porosity for energy harvesting applications† †Electronic supplementary information (ESI) available. See DOI: 10.1039/c7ta00967d Click here for additional data file.

PubMed Central

Zhang, Yan; Xie, Mengying; Roscow, James; Bao, Yinxiang; Zhou, Kechao

2017-01-01

This paper demonstrates the significant benefits of exploiting highly aligned porosity in piezoelectric and pyroelectric materials for improved energy harvesting performance. Porous lead zirconate (PZT) ceramics with aligned pore channels and varying fractions of porosity were manufactured in a water-based suspension using freeze-casting. The aligned porous PZT ceramics were characterized in detail for both piezoelectric and pyroelectric properties and their energy harvesting performance figures of merit were assessed parallel and perpendicular to the freezing direction. As a result of the introduction of porosity into the ceramic microstructure, high piezoelectric and pyroelectric harvesting figures of merits were achieved for porous freeze-cast PZT compared to dense PZT due to the reduced permittivity and volume specific heat capacity. Experimental results were compared to parallel and series analytical models with good agreement and the PZT with porosity aligned parallel to the freezing direction exhibited the highest piezoelectric and pyroelectric harvesting response; this was a result of the enhanced interconnectivity of the ferroelectric material along the poling direction and reduced fraction of unpoled material that leads to a higher polarization. A complete thermal energy harvesting system, composed of a parallel-aligned PZT harvester element and an AC/DC converter, was successfully demonstrated by charging a storage capacitor. The maximum energy density generated by the 60 vol% porous parallel-connected PZT when subjected to thermal oscillations was 1653 μJ cm–3, which was 374% higher than that of the dense PZT with an energy density of 446 μJ cm–3. The results are beneficial for the design and manufacture of high performance porous pyroelectric and piezoelectric materials in devices for energy harvesting and sensor applications. PMID:28580142

Nanocomposites with increased energy density through high aspect ratio PZT nanowires.

PubMed

Tang, Haixiong; Lin, Yirong; Andrews, Clark; Sodano, Henry A

2011-01-07

High energy storage plays an important role in the modern electric industry. Herein, we investigated the role of filler aspect ratio in nanocomposites for energy storage. Nanocomposites were synthesized using lead zirconate titanate (PZT) with two different aspect ratio (nanowires, nanorods) fillers at various volume fractions dispersed in a polyvinylidene fluoride (PVDF) matrix. The permittivity constants of composites containing nanowires (NWs) were higher than those with nanorods (NRs) at the same inclusion volume fraction. It was also indicated that the high frequency loss tangent of samples with PZT nanowires was smaller than for those with nanorods, demonstrating the high electrical energy storage efficiency of the PZT NW nanocomposite. The high aspect ratio PZT NWs showed a 77.8% increase in energy density over the lower aspect ratio PZT NRs, under an electric field of 15 kV mm(-1) and 50% volume fraction. The breakdown strength was found to decrease with the increasing volume fraction of PZT NWs, but to only change slightly from a volume fraction of around 20%-50%. The maximum calculated energy density of nanocomposites is as high as 1.158 J cm(-3) at 50% PZT NWs in PVDF. Since the breakdown strength is lower compared to a PVDF copolymer such as poly(vinylidene fluoride-tertrifluoroethylene-terchlorotrifluoroethylene) P(VDF-TreEE-CTFE) and poly(vinylidene fluoride-co-hexafluoropropylene) P(VDF-HFP), the energy density of the nanocomposite could be significantly increased through the use of PZT NWs and a polymer with greater breakdown strength. These results indicate that higher aspect ratio fillers show promising potential to improve the energy density of nanocomposites, leading to the development of advanced capacitors with high energy density.

Enhanced pyroelectric and piezoelectric properties of PZT with aligned porosity for energy harvesting applications.

PubMed

Zhang, Yan; Xie, Mengying; Roscow, James; Bao, Yinxiang; Zhou, Kechao; Zhang, Dou; Bowen, Chris R

2017-04-14

This paper demonstrates the significant benefits of exploiting highly aligned porosity in piezoelectric and pyroelectric materials for improved energy harvesting performance. Porous lead zirconate (PZT) ceramics with aligned pore channels and varying fractions of porosity were manufactured in a water-based suspension using freeze-casting. The aligned porous PZT ceramics were characterized in detail for both piezoelectric and pyroelectric properties and their energy harvesting performance figures of merit were assessed parallel and perpendicular to the freezing direction. As a result of the introduction of porosity into the ceramic microstructure, high piezoelectric and pyroelectric harvesting figures of merits were achieved for porous freeze-cast PZT compared to dense PZT due to the reduced permittivity and volume specific heat capacity. Experimental results were compared to parallel and series analytical models with good agreement and the PZT with porosity aligned parallel to the freezing direction exhibited the highest piezoelectric and pyroelectric harvesting response; this was a result of the enhanced interconnectivity of the ferroelectric material along the poling direction and reduced fraction of unpoled material that leads to a higher polarization. A complete thermal energy harvesting system, composed of a parallel-aligned PZT harvester element and an AC/DC converter, was successfully demonstrated by charging a storage capacitor. The maximum energy density generated by the 60 vol% porous parallel-connected PZT when subjected to thermal oscillations was 1653 μJ cm -3 , which was 374% higher than that of the dense PZT with an energy density of 446 μJ cm -3 . The results are beneficial for the design and manufacture of high performance porous pyroelectric and piezoelectric materials in devices for energy harvesting and sensor applications.

Enhanced Output Power of PZT Nanogenerator by Controlling Surface Morphology of Electrode.

PubMed

Jung, Woo-Suk; Lee, Won-Hee; Ju, Byeong-Kwon; Yoon, Seok-Jin; Kang, Chong-Yun

2015-11-01

Piezoelectric power generation using Pb(Zr,Ti)O3(PZT) nanowires grown on Nb-doped SrTiO3(nb:STO) substrate has been demonstrated. The epitaxial PZT nanowires prepared by a hydrothermal method, with a diameter and length of approximately 300 nm and 7 μm, respecively, were vertically aligned on the substrate. An embossed Au top electrode was applied to maximize the effective power generation area for non-uniform PZT nanowires. The PZT nanogenerator produced output power density of 0.56 μW/cm2 with a voltage of 0.9 V and current of 75 nA. This research suggests that the morphology control of top electrode can be useful to improve the efficiency of piezoelectric power generation.

Piezoelectric characterization of Pb(Zr,Ti)O3 thin films deposited on metal foil substrates by dip coating

NASA Astrophysics Data System (ADS)

Hida, Hirotaka; Hamamura, Tomohiro; Nishi, Takahito; Tan, Goon; Umegaki, Toshihito; Kanno, Isaku

2017-10-01

We fabricated the piezoelectric bimorphs composed of Pb(Zr,Ti)O3 (PZT) thin films on metal foil substrates. To efficiently inexpensively manufacture piezoelectric bimorphs with high flexibility, 1.2-µm-thick PZT thin films were directly deposited on both surfaces of 10- and 20-µm-thick bare stainless-steel (SS) foil substrates by dip coating with a sol-gel solution. We confirmed that the PZT thin films deposited on the SS foil substrates at 500 °C or above have polycrystalline perovskite structures and the measured relative dielectric constant and dielectric loss were 323-420 and 0.12-0.17, respectively. The PZT bimorphs were demonstrated by comparing the displacements of the cantilever specimens driven by single- and double-side PZT thin films on the SS foil substrates under the same applied voltage. We characterized the piezoelectric properties of the PZT bimorphs and the calculated their piezoelectric coefficient |e 31,f| to be 0.3-0.7 C/m2.

Ferroelectric properties of PZT/BFO multilayer thin films prepared using the sol-gel method.

PubMed

Jo, Seo-Hyeon; Lee, Sung-Gap; Lee, Young-Hie

2012-01-05

In this study, Pb(Zr0.52Ti0.48)O3/BiFeO3 [PZT/BFO] multilayer thin films were fabricated using the spin-coating method on a Pt(200 nm)/Ti(10 nm)/SiO2(100 nm)/p-Si(100) substrate alternately using BFO and PZT metal alkoxide solutions. The coating-and-heating procedure was repeated several times to form the multilayer thin films. All PZT/BFO multilayer thin films show a void-free, uniform grain structure without the presence of rosette structures. The relative dielectric constant and dielectric loss of the six-coated PZT/BFO [PZT/BFO-6] thin film were approximately 405 and 0.03%, respectively. As the number of coatings increased, the remanent polarization and coercive field increased. The values for the BFO-6 multilayer thin film were 41.3 C/cm2 and 15.1 MV/cm, respectively. The leakage current density of the BFO-6 multilayer thin film at 5 V was 2.52 × 10-7 A/cm2.

Effects of crystalline quality and electrode material on fatigue in Pb(Zr,Ti)O3 thin film capacitors

NASA Astrophysics Data System (ADS)

Lee, J.; Johnson, L.; Safari, A.; Ramesh, R.; Sands, T.; Gilchrist, H.; Keramidas, V. G.

1993-07-01

Pb(Zr(0.52)Ti(0.48))O3 (PZT)/Y1Ba2Cu3O(x) (YBCO) heterostructures were grown by pulsed laser deposition, in which PZT films were epitaxial, highly oriented, or polycrystalline. These PZT films were obtained by varying the deposition temperature from 550 to 760 C or by using various substrates such as SrTiO3 (100), MgO (100), and r-plane sapphire. PZT films with Pt top electrodes exhibited large fatigue with 35-50 percent loss of the remanent polarization after 10 exp 9 cycles, depending on the crystalline quality. Polycrystalline films showed better fatigue resistance than epitaxial or highly oriented films. However, PZT films with both top and bottom YBCO electrodes had significantly improved fatigue resistance for both epitaxial and polycrystalline films. Electrode material seems to be a more important parameter in fatigue than the crystalline quality of the PZT films.

Design, Modeling and Performance Optimization of a Novel Rotary Piezoelectric Motor

NASA Technical Reports Server (NTRS)

Duong, Khanh A.; Garcia, Ephrahim

1997-01-01

This work has demonstrated a proof of concept for a torsional inchworm type motor. The prototype motor has shown that piezoelectric stack actuators can be used for rotary inchworm motor. The discrete linear motion of piezoelectric stacks can be converted into rotary stepping motion. The stacks with its high force and displacement output are suitable actuators for use in piezoelectric motor. The designed motor is capable of delivering high torque and speed. Critical issues involving the design and operation of piezoelectric motors were studied. The tolerance between the contact shoes and the rotor has proved to be very critical to the performance of the motor. Based on the prototype motor, a waveform optimization scheme was proposed and implemented to improve the performance of the motor. The motor was successfully modeled in MATLAB. The model closely represents the behavior of the prototype motor. Using the motor model, the input waveforms were successfully optimized to improve the performance of the motor in term of speed, torque, power and precision. These optimized waveforms drastically improve the speed of the motor at different frequencies and loading conditions experimentally. The optimized waveforms also increase the level of precision of the motor. The use of the optimized waveform is a break-away from the traditional use of sinusoidal and square waves as the driving signals. This waveform optimization scheme can be applied to any inchworm motors to improve their performance. The prototype motor in this dissertation as a proof of concept was designed to be robust and large. Future motor can be designed much smaller and more efficient with lessons learned from the prototype motor.

Highly Oriented Growth of Piezoelectric Thin Films on Silicon Using Two-Dimensional Nanosheets as Growth Template Layer.

PubMed

Nguyen, Minh D; Yuan, Huiyu; Houwman, Evert P; Dekkers, Matthijn; Koster, Gertjan; Ten Elshof, Johan E; Rijnders, Guus

2016-11-16

Ca 2 Nb 3 O 10 (CNOns) and Ti 0.87 O 2 (TiOns) metal oxide nanosheets (ns) are used as a buffer layer for epitaxial growth of piezoelectric capacitor stacks on Si and Pt/Ti/SiO 2 /Si (Pt/Si) substrates. Highly (001)- and (110)-oriented Pb(Zr 0.52 Ti 0.48 )O 3 (PZT) films are achieved by utilizing CNOns and TiOns, respectively. The piezoelectric capacitors are characterized by polarization and piezoelectric hysteresis loops and by fatigue measurements. The devices fabricated with SrRuO 3 top and bottom electrodes directly on nanosheets/Si have ferroelectric and piezoelectric properties well comparable with devices that use more conventional oxide buffer layers (stacks) such as YSZ, CeO 2 /YSZ, or SrTiO 3 on Si. The devices grown on nanosheets/Pt/Si with Pt top electrodes show significantly improved polarization fatigue properties over those of similar devices grown directly on Pt/Si. The differences in properties are ascribed to differences in the crystalline structures and the density of the films. These results show a route toward the fabrication of single crystal piezoelectric thin films and devices with high quality, long-lifetime piezoelectric capacitor structures on nonperovskite and even noncrystalline substrates such as glass or polished metal surfaces.

DOE Office of Scientific and Technical Information (OSTI.GOV)

Wang, Hong; Wang, Jy-An John; Ren, Fei

Integration of smart patches into full-tension splice connectors in overhead power transmission lines was investigated. Lead zirconate titanate (PZT) -5A was used as a smart material and an aluminum beam was used as a host structure. Negative electrode termination was examined by using copper adhesive tape and direct bonding methods. Various commercial adhesives were studied for PZT integration onto the host structure. Aluminum beam specimens with integrated PZT smart patches were tested under thermal cycling at a temperature of 125 C, which is the higher-end temperature experienced by in-service aluminum conductor steel-reinforced cables. Electromechanical impedance (EMI) measurements were conducted atmore » room temperature, and the root mean square deviation (RMSD) of the conductance signals was used to analyze the EMI data. It has been shown that the negative electrode method has an important effect on the performance of the integrated PZT. The PZT displayed more susceptibility to cracking when copper tape was used than when direct bonding was used. The reliability of PZT in direct bonding depended on the adhesives used in bonding layers. Although a hard alumina based adhesive can lead to cracking of the PZT, a high-temperature epoxy with adequate flexibility, such as Duralco 4538D, can provide the desired performance under target thermal cycling conditions. The RMSD parameter can characterize conductance signatures effectively. It also was demonstrated that RMSD can be used to quantify the fatigue of the PZT integration system, although RMSD is used primarily as a damage index in monitoring structural health.« less

{001} Oriented piezoelectric films prepared by chemical solution deposition on Ni foils

NASA Astrophysics Data System (ADS)

Yeo, Hong Goo; Trolier-McKinstry, Susan

2014-07-01

Flexible metal foil substrates are useful in some microelectromechanical systems applications including wearable piezoelectric sensors or energy harvesters based on Pb(Zr,Ti)O3 (PZT) thin films. Full utilization of the potential of piezoelectrics on metal foils requires control of the film crystallographic texture. In this study, {001} oriented PZT thin films were grown by chemical solution deposition (CSD) on Ni foil and Si substrates. Ni foils were passivated using HfO2 grown by atomic layer deposition in order to suppress substrate oxidation during subsequent thermal treatment. To obtain the desired orientation of PZT film, strongly (100) oriented LaNiO3 films were integrated by CSD on the HfO2 coated substrates. A high level of {001} LaNiO3 and PZT film orientation were confirmed by X-ray diffraction patterns. Before poling, the low field dielectric permittivity and loss tangents of (001) oriented PZT films on Ni are near 780 and 0.04 at 1 kHz; the permittivity drops significantly on poling due to in-plane to out-of-plane domain switching. (001) oriented PZT film on Ni displayed a well-saturated hysteresis loop with a large remanent polarization ˜36 μC/cm2, while (100) oriented PZT on Si showed slanted P-E hysteresis loops with much lower remanent polarizations. The |e31,f| piezoelectric coefficient was around 10.6 C/m2 for hot-poled (001) oriented PZT film on Ni.

MEMS-Based Waste Vibrational Energy Harvesters

DTIC Science & Technology

2013-06-01

7 1. Lead Zirconium Titanate ( PZT ) .........................................................7 2. Aluminum...Laboratory PiezoMUMPS Piezoelectric Multi-User MEMS Processes PZT Lead Zirconate Titanate SEM Scanning Electron Microscopy SiO2 Silicon...titanate ( PZT ) possess high 4 coupling between the electrical and mechanical domains [11]. The output voltage, V, is related to the z-component

Composite Pyroelectric Materials.

DTIC Science & Technology

1979-06-30

in hydtochloric acid .. The wax negative is reinvested with a PZT slip (43 volume% PZT, 53% 1120, 4% poly (vinyl alcohol)). Ultrasonics PZT-501A with an...Laboratory are also acknowledged with gratitude. This work was sponsored by the Department of Defense through contracts N00014-78-C-0291 and HDA 903-78

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.

PubMed

Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K

2010-10-01

This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.

Power harvesting using PZT ceramics embedded in orthopedic implants.

PubMed

Chen, Hong; Liu, Ming; Jia, Chen; Wang, Zihua

2009-09-01

Battery lifetime has been the stumbling block for many power-critical or maintenance-free real-time embedded applications, such as wireless sensors and orthopedic implants. Thus a piezoelectric material that could convert human motion into electrical energy provides a very attractive solution for clinical implants. In this work, we analyze the power generation characteristics of stiff lead zirconate titanate (PZT) ceramics and the equivalent circuit through extensive experiments. Our experimental framework allows us to explore many important design considerations of such a PZT-based power generator. Overall we can achieve a PZT element volume of 0.5 x 0.5 x 1.8 cm, which is considerably smaller than the results reported so far. Finally, we outline the application of our PZT elements in a total knee replacement (TKR) implant.

Lift-off process for fine-patterned PZT film using metal oxide as a sacrificial layer

NASA Astrophysics Data System (ADS)

Trong Tue, Phan; Shimoda, Tatsuya; Takamura, Yuzuru

2017-01-01

Patterning of lead zirconium titanate (PZT) films is crucial for highly integrated piezoelectric/ferroelectric micro-devices. In this work, we report a novel lift-off method using solution-processed indium zinc oxide (IZO) thin film as a sacrificial layer for sub-5 µm fine-patterning PZT film. The processes include IZO layer deposition and patterning, PZT film preparation, and final lift-off. The results reveal that the lift-off PZT processes provide better structural and electrical properties than those formed by the conventional wet-etching method. The successful patterning by the lift-off was mainly due to the fact that the IZO sacrificial layer is easy to etch and has a high-temperature resistance. This finding shows great promise for highly integrated electronic devices.

Voltage-impulse-induced dual-range nonvolatile magnetization modulation in metglas/PZT heterostructure

NASA Astrophysics Data System (ADS)

Tang, Xiaoli; Su, Hua; Zhang, Huaiwu; Sun, Nian X.

2016-11-01

Dual-range, nonvolatile magnetization modulation induced by voltage impulses was investigated in the metglas/lead zirconate titanate (PZT) heterostructure at room temperature. The heterostructure was obtained by bonding a square metglas ribbon on the top electrode of the PZT substrate, which contained defect dipoles resulting from acceptor doping. The PZT substrate achieved two strain hysteretic loops with the application of specific voltage impulse excitation modes. Through strain-mediated magnetoelectric coupling between the metglas ribbon and the PZT substrate, two strain hysteretic loops led to a dual-range nonvolatile magnetization modulation in the heterostructure. Reversible and stable voltage-impulse-induced nonvolatile modulation in the ferromagnetic resonance field and magnetic hysteresis characteristics were also realized. This method provides a promising approach in reducing energy consumption in magnetization modulation and other related devices.

Temperature dependence of field-responsive mechanisms in lead zirconate titanate

DOE Office of Scientific and Technical Information (OSTI.GOV)

Chung, Ching-Chang; Fancher, Chris M.; Isaac, Catherine

2017-05-17

An electric field loading stage was designed for use in a laboratory diffractometer that enables in situ investigations of the temperature dependence in the field response mechanisms of ferroelectric materials. The stage was demonstrated in this paper by measuring PbZr 1-xTi xO 3 (PZT) based materials—a commercially available PZT and a 1% Nb-doped PbZr 0.56Ti 0.44O 3 (PZT 56/44)—over a temperature range of 25°C to 250°C. The degree of non-180° domain alignment (η 002) of the PZT as a function of temperature was quantified. η 002 of the commercially available PZT increases exponentially with temperature, and was analyzed as amore » thermally activated process as described by the Arrhenius law. The activation energy for thermally activated domain wall depinning process in PZT was found to be 0.47 eV. Additionally, a field-induced rhombohedral to tetragonal phase transition was observed 5°C below the rhombohedral-tetragonal transition in PZT 56/44 ceramic. The field-induced tetragonal phase fraction was increased 41.8% after electrical cycling. Finally, a large amount of domain switching (η 002=0.45 at 1.75 kV/mm) was observed in the induced tetragonal phase.« less

A Spherically-Shaped PZT Thin Film Ultrasonic Transducer with an Acoustic Impedance Gradient Matching Layer Based on a Micromachined Periodically Structured Flexible Substrate

PubMed Central

Feng, Guo-Hua; Liu, Wei-Fan

2013-01-01

This paper presents the microfabrication of an acoustic impedance gradient matching layer on a spherically-shaped piezoelectric ultrasonic transducer. The acoustic matching layer can be designed to achieve higher acoustic energy transmission and operating bandwidth. Also included in this paper are a theoretical analysis of the device design and a micromachining technique to produce the novel transducer. Based on a design of a lead titanium zirconium (PZT) micropillar array, the constructed gradient acoustic matching layer has much better acoustic transmission efficiency within a 20–50 MHz operation range compared to a matching layer with a conventional quarter-wavelength thickness Parylene deposition. To construct the transducer, periodic microcavities are built on a flexible copper sheet, and then the sheet forms a designed curvature with a ball shaping. After PZT slurry deposition, the constructed PZT micropillar array is released onto a curved thin PZT layer. Following Parylene conformal coating on the processed PZT micropillars, the PZT micropillars and the surrounding Parylene comprise a matching layer with gradient acoustic impedance. By using the proposed technique, the fabricated transducer achieves a center frequency of 26 MHz and a −6 dB bandwidth of approximately 65%. PMID:24113683

Fabrication and Evaluation of One-Axis Oriented Lead Zirconate Titanate Films Using Metal-Oxide Nanosheet Interface Layer

NASA Astrophysics Data System (ADS)

Minemura, Yoshiki; Nagasaka, Kohei; Kiguchi, Takanori; Konno, Toyohiko J.; Funakubo, Hiroshi; Uchida, Hiroshi

2013-09-01

Nanosheet Ca2Nb3O20 (ns-CN) layers with pseudo-perovskite-type crystal configuration were applied on the surface of polycrystalline metal substrates to achieve preferential crystal orientation of Pb(Zr,Ti)O3 (PZT) films for the purpose of enhanced ferroelectricity comparable to that of epitaxial thin films. PZT films with tetragonal symmetry (Zr/Ti=0.40:0.60) were fabricated by chemical solution deposition (CSD) on ns-CN-buffered Inconel 625 and SUS 316L substrates, while ns-CN was applied on the the substrates by dip-coating. The preferential crystal growth on the ns-CN layer can be achieved by favorable lattice matching between (001)/(100)PZT and (001)ns-CN planes. The degree of (001) orientation was increased for PZT films on ns-CN/Inconel 625 and ns-CN/SUS 316L substrates, whereas randomly-oriented PZT films with a lower degree of (001) orientation were grown on bare and Inconel 625 films. Enhanced remanent polarization of 60 µC/cm2 was confirmed for the PZT films on ns-CN/metal substrates, ascribed to the preferential alignment of the polar [001] axis normal to the substrate surface, although it also suffered from higher coercive field above 500 kV/cm caused by PZT/metal interfacial reaction.

Polarization switching behavior of one-axis-oriented lead zirconate titanate films fabricated on metal oxide nanosheet layer

NASA Astrophysics Data System (ADS)

Uchida, Hiroshi; Ichinose, Daichi; Shiraishi, Takahisa; Shima, Hiromi; Kiguchi, Takanori; Akama, Akihiko; Nishida, Ken; Konno, Toyohiko J.; Funakubo, Hiroshi

2017-10-01

For the application of electronic devices using ferroelectric/piezoelectric components, one-axis-oriented tetragonal Pb(Zr0.40Ti0.60)O3 (PZT) films with thicknesses of up to 1 µm were fabricated with the aid of a Ca2Nb3O10 nanosheet (ns-CN) template for preferential crystal growth for evaluating their polarization switching behavior. The ns-CN template was supported on ubiquitous silicon (Si) wafer by a simple dip coating technique, followed by the repetitive chemical solution deposition (CSD) of PZT films. The PZT films were grown successfully with preferential crystal orientation of PZT(100) up to the thickness of 1020 nm. The (100)-oriented PZT film with ∼1 µm thickness exhibited unique polarization behavior of ferroelectric polarization, i.e., a marked increase in remanent polarization (P r) up to approximately 40 µC/cm2 induced by domain switching under high electric field, whereas the film with a lower thickness showed only a lower P r of approximately 11 µC/cm2 even under a high electric field. The ferroelectric property of the (100)-oriented PZT film after domain switching on ns-CN/Pt/Si can be comparable to those of (001)/(100)-oriented epitaxial PZT films.

Hybrid macro-micro fluidics system for a chip-based biosensor

NASA Astrophysics Data System (ADS)

Tamanaha, C. R.; Whitman, L. J.; Colton, R. J.

2002-03-01

We describe the engineering of a hybrid fluidics platform for a chip-based biosensor system that combines high-performance microfluidics components with powerful, yet compact, millimeter-scale pump and valve actuators. The microfluidics system includes channels, valveless diffuser-based pumps, and pinch-valves that are cast into a poly(dimethylsiloxane) (PDMS) membrane and packaged along with the sensor chip into a palm-sized plastic cartridge. The microfluidics are driven by pump and valve actuators contained in an external unit (with a volume ~30 cm3) that interfaces kinematically with the PDMS microelements on the cartridge. The pump actuator is a simple-lever, flexure-hinge displacement amplifier that increases the motion of a piezoelectric stack. The valve actuators are an array of cantilevers operated by shape memory alloy wires. All components can be fabricated without the need for complex lithography or micromachining, and can be used with fluids containing micron-sized particulates. Prototypes have been modeled and tested to ensure the delivery of microliter volumes of fluid and the even dispersion of reagents over the chip sensing elements. With this hybrid approach to the fluidics system, the biochemical assay benefits from the many advantages of microfluidics yet we avoid the complexity and unknown reliability of immature microactuator technologies.

Pop-up assembly of 3D structures actuated by heat shrinkable polymers

NASA Astrophysics Data System (ADS)

Cui, Jianxun; Adams, J. G. M.; Zhu, Yong

2017-12-01

Folding 2D sheets into desired 3D structures is a promising fabrication technique that can find a wide range of applications. Compressive buckling provides an attractive strategy to actuate the folding and can be applied to a broad range of materials. Here a new and simple method is reported to achieve controlled compressive buckling, which is actuated by a heat shrinkable polymer sheet. The buckling deformation is localized at the pre-defined creases in the 2D sheet, resulting in sharp folding. Two approaches are developed to actuate the transformation, which follow similar geometric rules. In the first approach, the 2D precursor is pushed from outside, which leads to a 3D structure surrounded by the shrunk polymer sheet. Assembled 3D structures include prisms/pyramids with different base shapes, house roof, partial soccer ball, Miura-ori structure and insect wing. In the second approach, the 2D precursor is pulled from inside, which leads to a 3D structure enclosing the shrunk polymer sheet. Prisms/pyramids with different base shapes are assembled. The assembled structures are further tessellated to fabricate cellular structures that can be used as thermal insulator and crash energy absorber. They are also stacked vertically to fabricate complex multilayer structures.

Synchronized motion control and precision positioning compensation of a 3-DOFs macro-micro parallel manipulator fully actuated by piezoelectric actuators

NASA Astrophysics Data System (ADS)

Zhang, Quan; Li, Chaodong; Zhang, Jiantao; Zhang, Xu

2017-11-01

The macro-micro combined approach, as an effective way to realize trans-scale nano-precision positioning with multi-dimensions and high velocity, plays a significant role in integrated circuit manufacturing field. A 3-degree-of-freedoms (3-DOFs) macro-micro manipulator is designed and analyzed to compromise the conflictions among the large stroke, high precision and multi-DOFs. The macro manipulator is a 3-Prismatic-Revolute-Revolute (3-PRR) structure parallel manipulator which is driven by three linear ultrasonic motors. The dynamic model and the cross-coupling error based synchronized motion controller of the 3-PRR parallel manipulator are theoretical analyzed and experimental tested. To further improve the positioning accuracy, a 3-DOFs monolithic compliant manipulator actuated by three piezoelectric stack actuators is designed. Then a multilayer BP neural network based inverse kinematic model identifier is developed to perform the positioning control. Finally, by forming the macro-micro structure, the dual stage manipulator successfully achieved the positioning task from the point (2 mm, 2 mm, 0 rad) back to the original point (0 mm, 0 mm, 0 rad) with the translation errors in X and Y directions less than ±50 nm and the rotation error around Z axis less than ±1 μrad, respectively.

Integrated Printed Circuit Board (PCB) Active Cooling With Piezoelectric Actuator

DTIC Science & Technology

2012-09-01

The cooler substrate is a laminated multilayer FR-4 substrate. Individual layers are patterned to support the active element, form a resonant...prepreg epoxy. Individual FR-4 lamina were mechanically machined to pattern each layer. The layers were aligned, stacked, and laminated to form the... laminated with 70/30 copper-nickel alloy or 80/20 nickel-chrome alloy and patterned by means of photolithographic techniques and wet etching in a ferric

Effect of Pb content and solution concentration of Pb{sub x}TiO{sub 3} seed layer on (100)-texture and ferroelectric/dielectric behavior of PZT (52/48) thin films

DOE Office of Scientific and Technical Information (OSTI.GOV)

Zhong, Jian; Batra, Vaishali; Han, Hui

The effect of Pb content and solution concentration of lead titanate (Pb{sub x}TiO{sub 3}) seed layer on the texture and electric properties of Pb{sub 1.1}(Zr{sub 0.52},Ti{sub 0.48})O{sub 3} (PZT) thin films was investigated. A variety of seed layers (y Pb{sub x}TiO{sub 3}) with varying solution concentration (y = 0.02, 0.05, 0.1, and 0.2 M) and Pb content (x = 1.0, 1.05, 1.1, and 1.2) was deposited on Pt/TiO{sub 2}/SiO{sub 2}/Si substrates using chemical-solution deposition method. PZT films were then deposited on these seed layers using the same process. X-ray diffraction (XRD) and X-ray photoelectron spectroscopy investigations of the seed layers confirm change in crystal structuremore » with variation in the solution properties. XRD studies of PZT films deposited on seed layers demonstrate that the seed layer helps in enhancing (100)-texture and suppressing (111)-texture. It was observed that PZT films prepared on seed layers with lower solution concentrations results in highly (100)-textured films, which further helps to improve the electric properties. The polarization and dielectric constant of the PZT films were seen to increase while the coercive field decreased with increase in (100)-texture. Irrespective of the seed layer solution concentration, higher Pb content in the seed layer deteriorates the PZT film properties. Ninety-five percent to ninety-six percent (100)-texture was obtained from thin PZT films deposited on seed layers of 0.02 M solution concentration with 1.05 and 1.10 Pb contents, which is higher than the values reported for thick PZT films. Optimization of both Pb content and solution concentration of the seed layer is a promising route to achieve highly (100)-textured PZT films with improved electric properties.« less

Design, fabrication, and testing of an ultrasonic de-icing system for helicopter rotor blades

NASA Astrophysics Data System (ADS)

Palacios, Jose Luis

A low-power, non-thermal ultrasonic de-icing system is introduced as a possible substitute for current electro-thermal systems. The system generates delaminating ultrasonic transverse shear stresses at the interface of accreted ice. A PZT-4 disk driven at 28.5 KHz (radial resonance of the disk) instantaneously de-bonds 2 mm thick freezer ice layers. The ice layers are accreted to a 0.7 mm thick, 30.4 cm x 30.4 cm steel plate at an environment temperature of -20°C. A power input of 50 Watts is applied to the actuator (50 V, 19.6 KV/m), which translates to a de-icing power of 0.07 W/cm2. A finite element model of the actuator bonded to the isotropic plate is used to guide the design of the system, and predicts the transverse shear stresses at the ice interface. Wind tunnel icing tests were conducted to demonstrate the potential use of the proposed system under impact icing conditions. Both glaze ice and rime ice were generated on steel and composite plates by changing the cloud conditions of the wind tunnel. Continuous ultrasonic vibration prevented impact ice formation around the actuator location at an input power not exceeding 0.18 W/cm 2 (1.2 W/in2). As ice thickness reached a critical thickness of approximately 1.2 mm, shedding occurred on those locations where ultrasonic transverse shear stresses exceeded the shear adhesion strength of the ice. Finite element transverse shear stress predictions correlate with observed experimental impact ice de-bonding behavior. To increase the traveling distance of propagating ultrasonic waves, ultrasonic shear horizontal wave modes are studied. Wave modes providing large modal interface transverse shear stress concentration coefficients (ISCC) between the host structure (0.7 mm thick steel plate) and accreted ice (2.5 mm thick ice layer) are identified and investigated for a potential increase in the wave propagation distance. Ultrasonic actuators able to trigger these optimum wave modes are designed and fabricated. Despite exciting wave modes with high ISCC values, instantaneous ice de-bonding is not observed at input powers under 100 Watts. The two triggered ultrasonic wave modes of the structure occur at high excitation frequencies, 202 KHz and 500 KHz respectively. At these frequencies, the ultrasonic actuators do not provide large enough transverse shear stresses to exceed the shear adhesion strength of the ice layer. Neither the actuator exciting the SH1 mode (202 KHz), nor the actuator triggering the SH2 mode (500 KHz) instantaneously de-bonds ice layers with an input power under 100 Watts.

Smart patch integration development of compression connector structural health monitoring in overhead transmission lines

NASA Astrophysics Data System (ADS)

Wang, Hong; Wang, Jy-An J.; Ren, Fei; Chan, John

2016-04-01

Integration of smart patches into full-tension splice connectors in overhead power transmission lines was investigated. Lead zirconate titanate (PZT) -5A was used as a smart material and an aluminum beam was used as a host structure. Negative electrode termination was examined by using copper adhesive tape and direct bonding methods. Various commercial adhesives were studied for PZT integration onto the host structure. Aluminum beam specimens with integrated PZT smart patches were tested under thermal cycling at a temperature of 125°C, which is the higher-end temperature experienced by in-service aluminum conductor steel-reinforced cables. Electromechanical impedance (EMI) measurements were conducted at room temperature, and the root mean square deviation (RMSD) of the conductance signals was used to analyze the EMI data. It has been shown that the negative electrode method has an important effect on the performance of the integrated PZT. The PZT displayed more susceptibility to cracking when copper tape was used than when direct bonding was used. The reliability of PZT in direct bonding depended on the adhesives used in bonding layers. Although a hard alumina-based adhesive can lead to cracking of the PZT, a high-temperature epoxy with adequate flexibility, such as Duralco 4538D, can provide the desired performance under target thermal cycling conditions. The RMSD parameter can characterize conductance signatures effectively. It also was demonstrated that RMSD can be used to quantify the fatigue of the PZT integration system, although RMSD is used primarily as a damage index in monitoring structural health.

Enhanced Self-Biased Magnetoelectric Coupling in Laser-Annealed Pb(Zr,Ti)O3 Thick Film Deposited on Ni Foil.

PubMed

Palneedi, Haribabu; Maurya, Deepam; Geng, Liwei D; Song, Hyun-Cheol; Hwang, Geon-Tae; Peddigari, Mahesh; Annapureddy, Venkateswarlu; Song, Kyung; Oh, Yoon Seok; Yang, Su-Chul; Wang, Yu U; Priya, Shashank; Ryu, Jungho

2018-04-04

Enhanced and self-biased magnetoelectric (ME) coupling is demonstrated in a laminate heterostructure comprising 4 μm-thick Pb(Zr,Ti)O 3 (PZT) film deposited on 50 μm-thick flexible nickel (Ni) foil. A unique fabrication approach, combining room temperature deposition of PZT film by granule spray in vacuum (GSV) process and localized thermal treatment of the film by laser radiation, is utilized. This approach addresses the challenges in integrating ceramic films on metal substrates, which is often limited by the interfacial chemical reactions occurring at high processing temperatures. Laser-induced crystallinity improvement in the PZT thick film led to enhanced dielectric, ferroelectric, and magnetoelectric properties of the PZT/Ni composite. A high self-biased ME response on the order of 3.15 V/cm·Oe was obtained from the laser-annealed PZT/Ni film heterostructure. This value corresponds to a ∼2000% increment from the ME response (0.16 V/cm·Oe) measured from the as-deposited PZT/Ni sample. This result is also one of the highest reported values among similar ME composite systems. The tunability of self-biased ME coupling in PZT/Ni composite has been found to be related to the demagnetization field in Ni, strain mismatch between PZT and Ni, and flexural moment of the laminate structure. The phase-field model provides quantitative insight into these factors and illustrates their contributions toward the observed self-biased ME response. The results present a viable pathway toward designing and integrating ME components for a new generation of miniaturized tunable electronic devices.

An ionic electro-active actuator made with graphene film electrode, chitosan and ionic liquid

NASA Astrophysics Data System (ADS)

He, Qingsong; Yu, Min; Yang, Xu; Kim, Kwang Jin; Dai, Zhendong

2015-06-01

A newly developed ionic electro-active actuator composed of an ionic electrolyte layer sandwiched between two graphene film layers was investigated. Scanning electronic microscopy observation and x-ray diffraction analysis showed that the graphene sheets in the film stacked in a nearly face-to-face fashion but did not restack back to graphite, and the resulting graphene film with low sheet resistance (10 Ω sq-1) adheres well to the electrolyte membrane. Contact angle measurement showed the surface energy (37.98 mJ m-2) of the ionic electrolyte polymer is 2.67 times higher than that (14.2 mJ m-2) of the Nafion membrane, contributing to the good adhesion between the graphene film electrode and the electrolyte membrane. An electric double-layer is formed at the interface between the graphene film electrode and the ionic electrolyte membrane under the input potential, resulting in a higher capacitance of 27.6 mF cm-2. We report that this ionic actuator exhibits adequate bending strain, ranging from 0.032 to 0.1% (305 to 945 μm) as functions of voltage.

Flexible and stretchable electrodes for dielectric elastomer actuators

NASA Astrophysics Data System (ADS)

Rosset, Samuel; Shea, Herbert R.

2013-02-01

Dielectric elastomer actuators (DEAs) are flexible lightweight actuators that can generate strains of over 100 %. They are used in applications ranging from haptic feedback (mm-sized devices), to cm-scale soft robots, to meter-long blimps. DEAs consist of an electrode-elastomer-electrode stack, placed on a frame. Applying a voltage between the electrodes electrostatically compresses the elastomer, which deforms in-plane or out-of plane depending on design. Since the electrodes are bonded to the elastomer, they must reliably sustain repeated very large deformations while remaining conductive, and without significantly adding to the stiffness of the soft elastomer. The electrodes are required for electrostatic actuation, but also enable resistive and capacitive sensing of the strain, leading to self-sensing actuators. This review compares the different technologies used to make compliant electrodes for DEAs in terms of: impact on DEA device performance (speed, efficiency, maximum strain), manufacturability, miniaturization, the integration of self-sensing and self-switching, and compatibility with low-voltage operation. While graphite and carbon black have been the most widely used technique in research environments, alternative methods are emerging which combine compliance, conduction at over 100 % strain with better conductivity and/or ease of patternability, including microfabrication-based approaches for compliant metal thin-films, metal-polymer nano-composites, nanoparticle implantation, and reel-to-reel production of μm-scale patterned thin films on elastomers. Such electrodes are key to miniaturization, low-voltage operation, and widespread commercialization of DEAs.

A study of metalized electrode self-clearing in electroactive polymer (EAP) based actuators

NASA Astrophysics Data System (ADS)

Ahmed, Saad; Ounaies, Zoubeida

2016-04-01

Electroactive polymer (EAP) based technologies have shown promise in areas such as artificial muscles, actuator, aerospace, medical and soft robotics. Still challenges remain such as low induced forces and defects-driven electrical breakdown, which impede the practical implementation of this technology. Multilayered or stacked configuration can address the low induced force issue whereas self-clearing can be a technique to improve breakdown limit of EAP based actuators. Self-clearing refers to the partial local breakdown of dielectric medium due to the presence of impurities, which in turn results in the evaporation of some of the metalized electrode. After this evaporation, the impurity is cleared and any current path would be safely cut off, which means the actuator continues to perform. It is a widely studied concept in the capacitor community, while it has not been studied much for EAP technologies. In this paper we report a systematic approach to precondition a silver-metalized electroactive polymer (EAP), more specifically P(VDF-TrFE-CTFE) terpolymer, using self-clearing concept. First, we show improvement in the dielectric breakdown strength of EAP based unimorph actuators after pre-clearing the impurities using low electric field (lower than dielectric breakdown of the terpolymer). Inspired by this improvement, we used Weibull statistics to systematically estimate the self-clearing/ preconditioning field needed to clear the defects. Then electrical breakdown experiments are conducted with and without preconditioning the samples to investigate its effect on the breakdown strength of the sample.

Dog-Bone Horns for Piezoelectric Ultrasonic/Sonic Actuators

NASA Technical Reports Server (NTRS)

Sherrit, Stewart; Bar-Cohen, Yoseph; Chang, Zensheu; Bao, Xiaoqi

2007-01-01

A shape reminiscent of a dog bone has been found to be superior to other shapes for mechanical-amplification horns that are components of piezoelectrically driven actuators used in a series of related devices denoted generally as ultrasonic/sonic drill/corers (USDCs). The first of these devices was reported in Ultrasonic/Sonic Drill/Corers With Integrated Sensors (NPO-20856), NASA Tech Briefs, Vol. 25, No. 1 (January 2001), page 38. The dog-bone shape was conceived especially for use in a more recent device in the series, denoted an ultrasonic/ sonic gopher, that was described in Ultrasonic/Sonic Mechanisms for Drilling and Coring (NPO-30291), NASA Tech Briefs, Vol. 27, No. 9 (September 2003), page 65. The figure shows an example of a dog-bone-shaped horn and other components of an ultrasonic gopher. Prerequisite to a meaningful description of this development is an unavoidably lengthy recapitulation of the principle of operation of a USDC and, more specifically, of the ultrasonic/sonic gopher as described previously in NASA Tech Briefs. The ultrasonic actuator includes a stack of piezoelectric rings, the horn, a metal backing, and a bolt that connects the aforementioned parts and provides compressive pre-strain to the piezoelectric stack to prevent breakage of the rings during extension. The stack of piezoelectric rings is excited at the resonance frequency of the overall ultrasonic actuator. Through mechanical amplification by the horn, the displacement in the ultrasonic vibration reaches tens of microns at the tip of the horn. The horn hammers an object that is denoted the free mass because it is free to move longitudinally over a limited distance between hard stops: The free mass bounces back and forth between the ultrasonic horn and a tool bit (a drill bit or a corer). Because the longitudinal speed of the free mass is smaller than the longitudinal speed of vibration of the tip of the horn, contact between the free mass and the horn tip usually occurs at a phase of the vibration favorable to transfer of momentum from the horn to the free mass. Therefore, the free mass picks up momentum and is accelerated back to the tool bit. Upon impact of the free mass on the tool bit, momentum is transferred to the tool bit. The impacts of the free mass on the tool bit repeat at a sonic frequency that can range from tens of hertz to about 1 kHz. The shock waves caused by the impacts of the free mass propagate to the interface between the tool bit and the medium (typically, rock, ice, or other brittle material) to be drilled or cored. The medium becomes fractured when its ultimate strain is exceeded at the medium/tool-bit interface. This concludes the description of the principle of operation.

Structural health monitoring using a hybrid network of self-powered accelerometer and strain sensors

NASA Astrophysics Data System (ADS)

Alavi, Amir H.; Hasni, Hassene; Jiao, Pengcheng; Lajnef, Nizar

2017-04-01

This paper presents a structural damage identification approach based on the analysis of the data from a hybrid network of self-powered accelerometer and strain sensors. Numerical and experimental studies are conducted on a plate with bolted connections to verify the method. Piezoelectric ceramic Lead Zirconate Titanate (PZT)-5A ceramic discs and PZT-5H bimorph accelerometers are placed on the surface of the plate to measure the voltage changes due to damage progression. Damage is defined by loosening or removing one bolt at a time from the plate. The results show that the PZT accelerometers provide a fairly more consistent behavior than the PZT strain sensors. While some of the PZT strain sensors are not sensitive to the changes of the boundary condition, the bimorph accelerometers capture the mode changes from undamaged to missing bolt conditions. The results corresponding to the strain sensors are better indicator to the location of damage compared to the accelerometers. The characteristics of the overall structure can be monitored with even one accelerometer. On the other hand, several PZT strain sensors might be needed to localize the damage.

Enhanced off-resonance magnetoelectric response in laser annealed PZT thick film grown on magnetostrictive amorphous metal substrate

NASA Astrophysics Data System (ADS)

Palneedi, Haribabu; Maurya, Deepam; Kim, Gi-Yeop; Priya, Shashank; Kang, Suk-Joong L.; Kim, Kwang-Ho; Choi, Si-Young; Ryu, Jungho

2015-07-01

A highly dense, 4 μm-thick Pb(Zr,Ti)O3 (PZT) film is deposited on amorphous magnetostrictive Metglas foil (FeBSi) by granule spray in vacuum process at room temperature, followed by its localized annealing with a continuous-wave 560 nm ytterbium fiber laser radiation. This longer-wavelength laser radiation is able to anneal the whole of thick PZT film layer without any deteriorative effects, such as chemical reaction and/or atomic diffusion, at the interface and crystallization of amorphous Metglas substrate. Greatly enhanced dielectric and ferroelectric properties of the annealed PZT are attributed to its better crystallinity and grain growth induced by laser irradiation. As a result, a colossal off-resonance magnetoelectric (ME) voltage coefficient that is two orders of magnitude larger than previously reported output from PZT/Metglas film-composites is achieved. The present work addresses the problems involved in the fabrication of PZT/Metglas film-composites and opens up emerging possibilities in employing piezoelectric materials with low thermal budget substrates (suitable for integrated electronics) and designing laminate composites for ME based devices.

Dielectric and Piezoelectric Properties of PZT Composite Thick Films with Variable Solution to Powder Ratios.

PubMed

Wu, Dawei; Zhou, Qifa; Shung, Koping Kirk; Bharadwaja, Srowthi N; Zhang, Dongshe; Zheng, Haixing

2009-05-08

The use of PZT films in sliver-mode high-frequency ultrasonic transducers applications requires thick, dense, and crack-free films with excellent piezoelectric and dielectric properties. In this work, PZT composite solutions were used to deposit PZT films >10 μm in thickness. It was found that the functional properties depend strongly on the mass ratio of PZT sol-gel solution to PZT powder in the composite solution. Both the remanent polarization, P(r), and transverse piezoelectric coefficient, e(31,) (f), increase with increasing proportion of the sol-gel solution in the precursor. Films prepared using a solution-to-powder mass ratio of 0.5 have a remanent polarization of 8 μC/cm(2), a dielectric constant of 450 (at 1 kHz), and e(31,) (f) = -2.8 C/m(2). Increasing the solution-to-powder mass ratio to 6, the films were found to have remanent polarizations as large as 37 μC/cm(2), a dielectric constant of 1250 (at 1 kHz) and e(31,) (f) = -5.8 C/m(2).

A reusable PZT transducer for monitoring initial hydration and structural health of concrete.

PubMed

Yang, Yaowen; Divsholi, Bahador Sabet; Soh, Chee Kiong

2010-01-01

During the construction of a concrete structure, strength monitoring is important to ensure the safety of both personnel and the structure. Furthermore, to increase the efficiency of in situ casting or precast of concrete, determining the optimal time of demolding is important for concrete suppliers. Surface bonded lead zirconate titanate (PZT) transducers have been used for damage detection and parameter identification for various engineering structures over the last two decades. In this work, a reusable PZT transducer setup for monitoring initial hydration of concrete and structural health is developed, where a piece of PZT is bonded to an enclosure with two bolts tightened inside the holes drilled in the enclosure. An impedance analyzer is used to acquire the admittance signatures of the PZT. Root mean square deviation (RMSD) is employed to associate the change in concrete strength with changes in the PZT admittance signatures. The results show that the reusable setup is able to effectively monitor the initial hydration of concrete and the structural health. It can also be detached from the concrete for future re-use.

Ferroelectric properties of PZT/BFO multilayer thin films prepared using the sol-gel method

PubMed Central

2012-01-01

In this study, Pb(Zr0.52Ti0.48)O3/BiFeO3 [PZT/BFO] multilayer thin films were fabricated using the spin-coating method on a Pt(200 nm)/Ti(10 nm)/SiO2(100 nm)/p-Si(100) substrate alternately using BFO and PZT metal alkoxide solutions. The coating-and-heating procedure was repeated several times to form the multilayer thin films. All PZT/BFO multilayer thin films show a void-free, uniform grain structure without the presence of rosette structures. The relative dielectric constant and dielectric loss of the six-coated PZT/BFO [PZT/BFO-6] thin film were approximately 405 and 0.03%, respectively. As the number of coatings increased, the remanent polarization and coercive field increased. The values for the BFO-6 multilayer thin film were 41.3 C/cm2 and 15.1 MV/cm, respectively. The leakage current density of the BFO-6 multilayer thin film at 5 V was 2.52 × 10-7 A/cm2. PMID:22221519

A Reusable PZT Transducer for Monitoring Initial Hydration and Structural Health of Concrete

PubMed Central

Yang, Yaowen; Divsholi, Bahador Sabet; Soh, Chee Kiong

2010-01-01

During the construction of a concrete structure, strength monitoring is important to ensure the safety of both personnel and the structure. Furthermore, to increase the efficiency of in situ casting or precast of concrete, determining the optimal time of demolding is important for concrete suppliers. Surface bonded lead zirconate titanate (PZT) transducers have been used for damage detection and parameter identification for various engineering structures over the last two decades. In this work, a reusable PZT transducer setup for monitoring initial hydration of concrete and structural health is developed, where a piece of PZT is bonded to an enclosure with two bolts tightened inside the holes drilled in the enclosure. An impedance analyzer is used to acquire the admittance signatures of the PZT. Root mean square deviation (RMSD) is employed to associate the change in concrete strength with changes in the PZT admittance signatures. The results show that the reusable setup is able to effectively monitor the initial hydration of concrete and the structural health. It can also be detached from the concrete for future re-use. PMID:22399929

Micro-Machined High-Frequency (80 MHz) PZT Thick Film Linear Arrays

PubMed Central

Zhou, Qifa; Wu, Dawei; Liu, Changgeng; Zhu, Benpeng; Djuth, Frank; Shung, K. Kirk

2010-01-01

This paper presents the development of a micro-machined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT solgel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (−6 dB) of 60%. An insertion loss of −41 dB and adjacent element crosstalk of −21 dB were found at the center frequency. PMID:20889407

Thickness dependence of structural and piezoelectric properties of epitaxial Pb(Zr0.52Ti0.48)O3 films on Si and SrTiO3 substrates

NASA Astrophysics Data System (ADS)

Kim, D. M.; Eom, C. B.; Nagarajan, V.; Ouyang, J.; Ramesh, R.; Vaithyanathan, V.; Schlom, D. G.

2006-04-01

We report the structural and longitudinal piezoelectric responses (d33) of epitaxial Pb(Zr0.52Ti0.48)O3 (PZT) films on (001) SrTiO3 and Si substrates in the thickness range of 40nm -4μm. With increasing film thickness the tetragonality of PZT was reduced. The increase in d33 value with increasing film thicknesses was attributed to the reduction of substrate constraints and softening of PZT due to reduced tetragonality. The d33 values of PZT films on Si substrates (˜330pm/V) are higher than those on SrTiO3 substrates (˜200pm /V). The epitaxial PZT films on silicon will lead to the fabrication of high performance piezoelectric microelectromechanical devices.

Linear Actuator Has Long Stroke and High Resolution

NASA Technical Reports Server (NTRS)

Cook, Brant T.; Moore, Donald M.; Braun, David F.; Koenig, John S.; Hankins, Steve M.

2009-01-01

The term precision linear actuator, direct drive ( PLADD ) refers to a robust linear actuator designed to be capable of repeatedly performing, over a lifetime of the order of 5 to 10 years, positioning maneuvers that include, variously, submicron increments or slews of the order of a centimeter. The PLADD is capable of both long stroke (120 mm) and high resolution (repeatable increments of 20 nm). Unlike precise linear actuators of prior design, the PLADD contains no gears, levers, or hydraulic converters. The PLADD, now at the prototype stage of development, is intended for original use as a coarse-positioning actuator in a spaceborne interferometer. The PLADD could also be adapted to terrestrial applications in which there are requirements for long stroke and high resolution: potential applications include medical imaging and fabrication of semiconductor devices. The PLADD (see figure) includes a commercially available ball-screw actuator driven directly by a commercially available three-phase brushless DC motor. The ball-screw actuator comprises a spring-preloaded ball nut on a ball screw that is restrained against rotation as described below. The motor is coupled directly (that is, without an intervening gear train) to a drive link that, in turn, is coupled to the ball nut. By eliminating the gear train, the direct-drive design eliminates the complexity, backlash, and potential for misalignment associated with a gear train. To prevent inadvertent movement, there is a brake that includes flexured levers compressed against the drive link by preload springs. This is a power-off brake: There are also piezoelectric stacks that can be activated to oppose the springs and push the levers away from the drive link. Hence, power must be applied to the piezoelectric stacks to release the drive link from braking. To help ensure long operational life, all of the mechanical drive components are immersed in an oil bath within hermetically sealed bellows. The outer end of the bellows holds the outer end of the ball screw, thereby preventing rotation of the ball screw. Positioning is controlled by an electronic control system that includes digital and analog subsystems that interact with the motor and brake and with two sensor/encoder units: a Hall-effect-sensor rotation encoder and a linear glass-scale encoder. This system implements a proportional + integral + derivative control algorithm that results in variation of voltage commands to each of the three pairs of windings of the brushless DC motor. In one of two alternative control modes, the voltages are applied to the windings in a trapezoidal commutation scheme on the basis of timing signals obtained from the Hall-effect sensors; this scheme yields relatively coarse positioning - 24 steps per motor revolution. The second control mode involves a sinusoidal commutation scheme in which the output of the linear glass-scale encoder is transposed to rotational increments to yield much finer position feedback - more than 400,000 steps per revolution.

Effects of Polarization on Mechanical Properties of Lead Zirconate Titanate Ceramics Evaluated by Modified Small Punch Tests

NASA Astrophysics Data System (ADS)

Deng, Qihuang; Fan, Yuchi; Wang, Lianjun; Xiong, Zhi; Wang, Hongzhi; Li, Yaogang; Zhang, Qinghong; Kawasaki, Akira; Jiang, Wan

2012-01-01

Pb(Zr,Ti)O3 (PZT) ceramics were prepared by the conventional mixed oxide method, and the strength of the resultant PZT ceramics was evaluated using modified small punch (MSP) tests. Load-displacement curve test results showed that the crack-initiation and fracture strengths of PZT ceramics decreased after polarization. The effect of the polarization accelerated the fatigue properties of PZT ceramics. Scanning electron microscopy (SEM) results showed that microcracks were formed before the maximum load in the MSP test, and the first load drop corresponded to crack initiation.

Comparison of structural and electric properties of PbZr0.2Ti0.8O3 and CoFe2O4/PbZr0.2Ti0.8O3 films on (100)LaAlO3

NASA Astrophysics Data System (ADS)

Zhang, X. D.; Dho, Joonghoe; Park, Sungmin; Kwon, Hyosang; Hwang, Jihwan; Park, Gwangseo; Kwon, Daeyoung; Kim, Bongju; Jin, Yeryeong; Kim, Bog. G.; Karpinsky, D.; Kholkin, A. L.

2011-09-01

In this work, we investigated structural, electrical, and magnetic properties of ferroelectric PbZr0.2Ti0.8O3 (PZT) and ferrimagnetic/ferroelectric [CoFe2O4(CFO)/PZT] bilayers grown on (100)LaAlO3 (LAO) substrates supplied with bottom 50 nm thick LaNiO3 electrodes. Interestingly, structural and electrical properties of the PZT layer exhibited remarkable changes after the top-layer CFO deposition. X-ray diffraction data suggested that both the c- and a-domains exist in the PZT layer and the tetragonality of the PZT decreases upon the top-layer deposition. A variation in the electrical properties of the PZT layer upon the CFO deposition was investigated by polarization versus voltage (P-V), capacitance versus voltage (C-V), and capacitance versus frequency (C-f) measurements. The CFO deposition induced a slight decrease of the remnant polarization and more symmetric behavior of P-V loops as well as led to the improvement of fatigue behavior. The tentative origin of enhanced fatigue endurance is discussed based on the measurement results. These results were corroborated by local piezoelectric measurements. Ferrimagnetic property of the CFO/PZT bilayer was confirmed by magnetic measurement at room temperature.

Assessment of a new piezoelectric transducer sensor for noninvasive cardiorespiratory monitoring of newborn infants in the NICU.

PubMed

Sato, Shinichi; Ishida-Nakajima, Wako; Ishida, Akira; Kawamura, Masanari; Miura, Shinobu; Ono, Kyoichi; Inagaki, Nobuya; Takada, Goro; Takahashi, Tsutomu

2010-01-01

Electrocardiogram (ECG) and impedance pneumography (IPG), the most widely used techniques for cardiorespiratory monitoring in the neonatal intensive care unit (NICU), have the disadvantage of causing skin damage when used for very premature newborn infants. To prevent skin damage, we designed a new piezoelectric transducer (PZT) sensor. To assess the potential of the PZT sensor for cardiorespiratory monitoring in the NICU. The PZT sensor was placed under a folded towel under a neonate to detect an acoustic cardiorespiratory signal, from which heart rate (HR) and breathing rate (BR) were calculated, together with simultaneous ECG/IPG recording for 1-9 days for long and brief (1-min) assessment. The brief assessment showed average correlation coefficients of 0.92 +/- 0.12 and 0.95 +/- 0.02 between instantaneous HRs/BRs detected by the PZT sensor and ECG/IPG in 27 and 11 neonates examined. During the long assessment, the HR detection rate by the PZT sensor was approximately 10% lower than that by ECG (82.6 +/- 12.9 vs. 91.8 +/- 4.1%; p = 0.001, n = 27), although comparable (90.3 +/- 4.1 vs. 92.5 +/- 3.4%, p = 0.081) in approximately 70% (18/27) of neonates examined; BR detection rate was comparable between the PZT sensor and IPG during relatively stable signal conditions (95.9 +/- 4.0 vs. 95.3 +/- 3.5%; p = 0.38, n = 11). The PZT sensor caused neither skin damage nor body movement increase in all neonates examined. The PZT sensor is noninvasive and does not cause skin irritation, and we believe it does provide a reliable, accurate cardiorespiratory monitoring tool for use in the NICU, although the issue of mechanical-ventilation noise remains to be solved. Copyright 2010 S. Karger AG, Basel.

Role of random electric fields in relaxors

PubMed Central

Phelan, Daniel; Stock, Christopher; Rodriguez-Rivera, Jose A.; Chi, Songxue; Leão, Juscelino; Long, Xifa; Xie, Yujuan; Bokov, Alexei A.; Ye, Zuo-Guang; Ganesh, Panchapakesan; Gehring, Peter M.

2014-01-01

PbZr1–xTixO3 (PZT) and Pb(Mg1/3Nb2/3)1–xTixO3 (PMN-xPT) are complex lead-oxide perovskites that display exceptional piezoelectric properties for pseudorhombohedral compositions near a tetragonal phase boundary. In PZT these compositions are ferroelectrics, but in PMN-xPT they are relaxors because the dielectric permittivity is frequency dependent and exhibits non-Arrhenius behavior. We show that the nanoscale structure unique to PMN-xPT and other lead-oxide perovskite relaxors is absent in PZT and correlates with a greater than 100% enhancement of the longitudinal piezoelectric coefficient in PMN-xPT relative to that in PZT. By comparing dielectric, structural, lattice dynamical, and piezoelectric measurements on PZT and PMN-xPT, two nearly identical compounds that represent weak and strong random electric field limits, we show that quenched (static) random fields establish the relaxor phase and identify the order parameter. PMID:24449912

Ferroelectric Schottky diode behavior from a SrRuO3-Pb(Zr0.2Ti0.8)O3-Ta structure

NASA Astrophysics Data System (ADS)

Pintilie, Lucian; Stancu, Viorica; Trupina, L.; Pintilie, Ioana

2010-08-01

A single ferroelectric Schottky diode was obtained on a SrRuO3-Pb(Zr0.2Ti0.8)O3-Ta (SRO-PZT20/80-Ta) structure in which the SRO-PZT20/80 interface is the rectifying contact and the PZT20/80-Ta interface behaves as a quasiohmic contact. Both the capacitance-voltage (C-V) and the current-voltage (I-V) characteristics show the memory effect due to the ferroelectric polarization. However, retention studies had revealed that only the “down” orientation of ferroelectric polarization is stable in time (polarization oriented from top to bottom contact). The analysis of the experimental results suggests that the PZT20/80 is n type and that the stable orientation of polarization is related to the presence of a depletion region at the SRO-PZT20/80 Schottky interface.

Dielectric and acoustical high frequency characterisation of PZT thin films

NASA Astrophysics Data System (ADS)

Conde, Janine; Muralt, Paul

2010-02-01

Pb(Zr, Ti)O3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solution system is to overcome mechanical losses generally observed in PZT ceramics. To increase the understanding of these losses in textured thin films, thin film bulk acoustic resonators (TFBAR's) based on PZT thin films with compositions either in the tetragonal region or at the morphotropic phase boundary and (111) or {100} textures were fabricated and studied up to 2 GHz. The dielectric and elastic materials coefficients were extracted from impedance measurements at the resonance frequency. The dispersion of the dielectric constant was obtained from impedance measurements up to 2 GHz. The films with varying compositions, textures and deposition methods (sol-gel or sputtering) were compared in terms of dielectric and acoustical properties.

Improvement of Sol-Gel Derived PbZrxTi1-xO3 Film Properties Using Thermal Press Treatment

NASA Astrophysics Data System (ADS)

Kaneda, Toshihiko; Kim, Joo-Nam; Tokumitsu, Eisuke; Shimoda, Tatsuya

2010-09-01

A thermal press treatment was introduced in the sol-gel process of PbZrxTi1-xO3 (PZT) thin films for the first time and the crystalline and electrical characteristics of the PZT films were investigated. The thermal press treatment was applied to the amorphous PZT gel film before crystallization annealing. It is found that the crystalline orientation and grain size of the PZT film fabricated with the thermal press treatment are different from those of the film fabricated by the conventional sol-gel process without the thermal press treatment, even though the crystallization conditions are exactly the same. It is demonstrated that the electrical properties, especially leakage current density and breakdown field, are significantly improved for the PZT film fabricated with the thermal press treatment. Furthermore, we also demonstrate that the fatigue property is improved by introducing the thermal press treatment.

Characterization, fabrication, and analysis of soft dielectric elastomer actuators capable of complex 3D deformation

NASA Astrophysics Data System (ADS)

Lai, William

Inspired by nature, the development of soft actuators has drawn large attention to provide higher flexibility and allow adaptation to more complex environment. This thesis is focused on utilizing electroactive polymers as active materials to develop soft planar dielectric elastomer actuators capable of complex 3D deformation. The potential applications of such soft actuators are in flexible robotic arms and grippers, morphing structures and flapping wings for micro aerial vehicles. The embraces design for a freestanding actuator utilizes the constrained deformation imposed by surface stiffeners on an electroactive membrane to avert the requirement of membrane pre-stretch and the supporting frames. The proposed design increases the overall actuator flexibility and degrees-of-freedom. Actuator design, fabrication, and performance are presented for different arrangement of stiffeners. Digital images correlation technique were utilized to evaluate the in-plane finite strain components, in order to elucidate the role of the stiffeners in controlling the three dimensional deformation. It was found that a key controlling factor was the localized deformation near the stiffeners, while the rest of the membrane would follow through. A detailed finite element modeling framework was developed with a user-material subroutine, built into the ABAQUS commercial finite element package. An experimentally calibrated Neo-Hookean based material model that coupled the applied electrical field to the actuator mechanical deformation was employed. The numerical model was used to optimize different geometrical features, electrode layup and stacking sequence of actuators. It was found that by splitting the stiffeners into finer segments, the force-stroke characteristics of actuator were able to be adjusted with stiffener configuration, while keeping the overall bending stiffness. The efficacy of actuators could also be greatly improved by increasing the stiffener periodicity. The developed framework would aid in designing and optimizing the dielectric elastomer actuator configurations for 3D prescribed deformation configuration. Finally, inspired by the membrane textures of bat wings, a study of utilizing fiber reinforcement on dielectric elastomer actuators were conducted for the mechanical and the coupled electromechanical characteristics. Woven fibers were employed on the surface of actuator membrane with different pre-deformed configurations. Experimentally, actuator stiffness changes were measured for up to four orders of magnitude. The orientation of embedded fibers controlled the level and the triggered phase of stiffness changes. A trade-off between the actuator stiffness and stroke could be controlled during the fabrication stage by the fiber orientation and the prestretch level of the base elastomer membrane. A simplified model using small-strain composite laminate theory was developed and accurately predicted the composite actuator stiffness. Additionally, compliant edge stiffeners were found had to present a marked overall effect on actuator electromechanical response. The developed simplified analytical solutions using Timoshenko-bimaterial laminate solution and composite laminate theory, as well as the developed finite element framework can be utilized in addressing more complex 3D deformation patterns and their electromechanical response.

Revisiting the blocking force test on ferroelectric ceramics using high energy x-ray diffraction

DOE Office of Scientific and Technical Information (OSTI.GOV)

Daniel, L., E-mail: laurent.daniel@u-psud.fr; GeePs; Hall, D. A.

2015-05-07

The blocking force test is a standard test to characterise the properties of piezoelectric actuators. The aim of this study is to understand the various contributions to the macroscopic behaviour observed during this experiment that involves the intrinsic piezoelectric effect, ferroelectric domain switching, and internal stress development. For this purpose, a high energy diffraction experiment is performed in-situ during a blocking force test on a tetragonal lead zirconate titanate (PZT) ceramic (Pb{sub 0.98}Ba{sub 0.01}(Zr{sub 0.51}Ti{sub 0.49}){sub 0.98}Nb{sub 0.02}O{sub 3}). It is shown that the usual macroscopic linear interpretation of the test can also be performed at the single crystal scale,more » allowing the identification of local apparent piezoelectric and elastic properties. It is also shown that despite this apparent linearity, the blocking force test involves significant non-linear behaviour mostly due to domain switching under electric field and stress. Although affecting a limited volume fraction of the material, domain switching is responsible for a large part of the macroscopic strain and explains the high level of inter- and intra-granular stresses observed during the course of the experiment. The study shows that if apparent piezoelectric and elastic properties can be identified for PZT single crystals from blocking stress curves, they may be very different from the actual properties of polycrystalline materials due to the multiplicity of the physical mechanisms involved. These apparent properties can be used for macroscopic modelling purposes but should be considered with caution if a local analysis is aimed at.« less

Ultra-High Sensitive Magnetoelectric Nanocomposite Current Sensors

DTIC Science & Technology

2009-12-01

textured grains. In the sintered composite, PZT -PZN...constant increases by 50% for the moderate degree of texturing . Figure 8 shows the ME coefficient of trilayer with textured PZT – PZN as function of DC...1000 1100 d E /d H ( m V /c m .O e ) Field (Oe) NCZF - PZT - PZN ( textured ) - NCZF Figure 8: ME coefficient of the textured ME composite.

Exploring the piezoelectric performance of PZT particulate-epoxy composites loaded in shear

NASA Astrophysics Data System (ADS)

Van Loock, F.; Deutz, D. B.; van der Zwaag, S.; Groen, W. A.

2016-08-01

The active and passive piezoelectric response of lead zirconium titanate (PZT)-epoxy particulate composites loaded in shear is studied using analytical models, a finite element model and by experiments. The response is compared to that of the same composites when loaded in simple tension. Analogously to bulk PZT, particulate PZT-polymer composites loaded in shear show higher piezoelectric charge coefficient (d 15) and energy density figure of merit (FOM15) values compared to simple tension (d 33) and (FOM33). This outcome demonstrates the as-yet barely explored potential of piezoelectric particulate composites for optimal strain energy harvesting when activated in shear.

Flexible PZT Thin Film Tactile Sensor for Biomedical Monitoring

PubMed Central

Tseng, Hong-Jie; Tian, Wei-Cheng; Wu, Wen-Jong

2013-01-01

This paper presents the development of tactile sensors using the sol-gel process to deposit a PZT thin-film from 250 nm to 1 μm on a flexible stainless steel substrate. The PZT thin-film tactile sensor can be used to measure human pulses from several areas, including carotid, brachial, finger, ankle, radial artery, and the apical region. Flexible PZT tactile sensors can overcome the diverse topology of various human regions and sense the corresponding signals from human bodies. The measured arterial pulse waveform can be used to diagnose hypertension and cardiac failure in patients. The proposed sensors have several advantages, such as flexibility, reliability, high strain, low cost, simple fabrication, and low temperature processing. The PZT thin-film deposition process includes a pyrolysis process at 150 °C/500 °C for 10/5 min, followed by an annealing process at 650 °C for 10 min. Finally, the consistent pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.798 mV/g. PMID:23698262

Flexible PZT thin film tactile sensor for biomedical monitoring.

PubMed

Tseng, Hong-Jie; Tian, Wei-Cheng; Wu, Wen-Jong

2013-04-25

This paper presents the development of tactile sensors using the sol-gel process to deposit a PZT thin-film from 250 nm to 1 μm on a flexible stainless steel substrate. The PZT thin-film tactile sensor can be used to measure human pulses from several areas, including carotid, brachial, finger, ankle, radial artery, and the apical region. Flexible PZT tactile sensors can overcome the diverse topology of various human regions and sense the corresponding signals from human bodies. The measured arterial pulse waveform can be used to diagnose hypertension and cardiac failure in patients. The proposed sensors have several advantages, such as flexibility, reliability, high strain, low cost, simple fabrication, and low temperature processing. The PZT thin-film deposition process includes a pyrolysis process at 150 °C/500 °C for 10/5 min, followed by an annealing process at 650 °C for 10 min. Finally, the consistent pulse wave velocity (PWV) was demonstrated based on human pulse measurements from apical to radial, brachial to radial, and radial to ankle. It is characterized that the sensitivity of our PZT-based tactile sensor was approximately 0.798 mV/g.

Dependence of e31,f on polar axis texture for tetragonal Pb(Zrx,Ti1-x)O3 thin films

NASA Astrophysics Data System (ADS)

Yeager, Charles B.; Ehara, Yoshitaka; Oshima, Naoya; Funakubo, Hiroshi; Trolier-McKinstry, Susan

2014-09-01

It was shown by Ouyang et al. [Appl. Phys. Lett. 86, 152901 (2005)] that the piezoelectric e31,f coefficient is largest parallel to the spontaneous polarization in tetragonal PbZrxTi1-xO3 (PZT) films. However, the expected piezoelectric data are typically calculated from phenomenological constants derived from data on ceramic PZT. In this work, the dependence of e31,f on c-axis texture fraction, f001, for {001}PZT thin films was measured by growing films with systematically changed f001 using CaF2, MgO, SrTiO3, and Si substrates. An approximately linear increase in e31,f with f001 was observed for compositions up to 43 mol. % Zr, and 100% c-domain properties were extrapolated. It was demonstrated that c-axis PZT films can achieve e31,f exceeding -12 C/m2 for many tetragonal compositions. The energy harvesting figure of merit, e31,f2/ɛr, for c-axis PZT films surpassed 0.8 C2/m4. This is larger than the figure of merit of gradient-free PZT films grown on Si substrates by a factor of four.

Enhanced off-resonance magnetoelectric response in laser annealed PZT thick film grown on magnetostrictive amorphous metal substrate

DOE Office of Scientific and Technical Information (OSTI.GOV)

Palneedi, Haribabu; Functional Ceramics Group, Korea Institute of Materials Science; Maurya, Deepam

2015-07-06

A highly dense, 4 μm-thick Pb(Zr,Ti)O{sub 3} (PZT) film is deposited on amorphous magnetostrictive Metglas foil (FeBSi) by granule spray in vacuum process at room temperature, followed by its localized annealing with a continuous-wave 560 nm ytterbium fiber laser radiation. This longer-wavelength laser radiation is able to anneal the whole of thick PZT film layer without any deteriorative effects, such as chemical reaction and/or atomic diffusion, at the interface and crystallization of amorphous Metglas substrate. Greatly enhanced dielectric and ferroelectric properties of the annealed PZT are attributed to its better crystallinity and grain growth induced by laser irradiation. As a result, amore » colossal off-resonance magnetoelectric (ME) voltage coefficient that is two orders of magnitude larger than previously reported output from PZT/Metglas film-composites is achieved. The present work addresses the problems involved in the fabrication of PZT/Metglas film-composites and opens up emerging possibilities in employing piezoelectric materials with low thermal budget substrates (suitable for integrated electronics) and designing laminate composites for ME based devices.« less

Numerical analysis of PZT rebar active sensing system for structural health monitoring of RC structure

NASA Astrophysics Data System (ADS)

Wu, F.; Yi, J.; Li, W. J.

2014-03-01

An active sensing diagnostic system for reinforced concrete SHM has been under investigation. Test results show that the system can detect the damage of the structure. To fundamentally understand the damage algorithm and therefore to establish a robust diagnostic method, accurate Finite Element Analysis (FEA) for the system becomes essential. For the system, a rebar with surface bonded PZT under a transient wave load was simulated and analyzed using commercial FEA software. A detailed 2D axi-symmetric model for a rebar attaching PZT was first established. The model simulates the rebar with wedges, an epoxy adhesive layer, as well as a PZT layer. PZT material parameter transformation with high order tensors was discussed due to the format differences between IEEE Standard and ANSYS. The selection of material properties such as Raleigh damping coefficients was discussed. The direct coupled-field analysis type was selected during simulation. The results from simulation matched well with the experimental data. Further simulation for debonding damage detection for concrete beam with the PZT rebar has been performed. And the numerical results have been validated with test results too. The good consistency between two proves that the numerical models were reasonably accurate. Further system optimization has been performed based on these models. By changing PZT layout and size, the output signals could be increased with magnitudes. And the damage detection signals have been found to be increased exponentially with the debonding size of the rebar.

Control of mechanical response of freestanding PbZr0.52Ti0.48O3 films through texture

NASA Astrophysics Data System (ADS)

Das, Debashish; Sanchez, Luz; Martin, Joel; Power, Brian; Isaacson, Steven; Polcawich, Ronald G.; Chasiotis, Ioannis

2016-09-01

The texture of piezoelectric lead zirconate titanate (PZT) thin films plays a key role in their mechanical response and linearity in the stress vs. strain behavior. The open circuit mechanical properties of PZT films with controlled texture varying from 100% (001) to 100% (111) were quantified with the aid of direct strain measurements from freestanding thin film specimens. The texture was tuned using a highly {111}-textured Pt substrate and excess-Pb in the PbTiO3 seed layer. The mechanical and ferroelastic properties of 500 nm thick PZT (52/48) films were found to be strongly dependent on grain orientation: the lowest elastic modulus of 90 ± 2 GPa corresponded to pure (001) texture, and its value increased linearly with the percentage of (111) texture reaching 122 ± 3 GPa for pure (111) texture. These elastic modulus values were between those computed for transversely isotropic textured PZT films by using the soft and hard bulk PZT compliance coefficients. Pure (001) texture exhibited maximum non-linearity and ferroelastic domain switching, contrary to pure (111) texture that exhibited more linearity and the least amount of switching. A micromechanics model was employed to calculate the strain due to domain switching. The model fitted well the non-linearities in the experimental stress-strain curves of (001) and (111) textured PZT films, predicting 17% and 10% of switched 90° domains that initially were favorably aligned with the applied stress in (001) and (111) textured PZT films, respectively.

Modeling and characterization of dielectrophoretically structured piezoelectric composites using piezoceramic particle inclusions with high aspect ratios

NASA Astrophysics Data System (ADS)

van den Ende, D. A.; Maier, R. A.; van Neer, P. L. M. J.; van der Zwaag, S.; Randall, C. A.; Groen, W. A.

2013-01-01

In this work, the piezoelectric properties at high electric fields of dielectrophoretically aligned PZT—polymer composites containing high aspect ratio particles (such as short fibers) are presented. Polarization and strain as a function of electric field are evaluated. The properties of the composites are compared to those of PZT-polymer composites with equiaxed particles, continuous PZT fiber-polymer composites, and bulk PZT ceramics. From high-field polarization and strain measurements, the effective field dependent permittivity and piezoelectric charge constant in the poling direction are determined for dielectrophoresis structured PZT-polymer composites, continuous PZT fiber-polymer composites, and bulk PZT ceramics. The changes in dielectric properties of the inclusions and the matrix at high fields influence the dielectric and piezoelectric properties of the composites. It is found that the permittivity and piezoelectric charge constants increase towards a maximum at an applied field of around 2.5-5 kV/mm. The electric field at which the maximum occurs depends on the aspect ratio and degree of alignment of the inclusions. Experimental values of d33 at low and high applied fields are compared to a model describing the composites as a continuous polymer matrix containing PZT particles of various aspect ratios arranged into chains. Thickness mode coupling factors were determined from measured impedance data using fitted equivalent circuit model simulations. The relatively high piezoelectric strain constants, voltage constants, and thickness coupling factors indicate that such aligned short fiber composites could be useful as flexible large area transducers.

Effect of sol temperature on structural, morphological and magnetic properties of PZT thin films on alumina substrate

NASA Astrophysics Data System (ADS)

Sreelalitha, K.; Thyagarajan, K.

2016-01-01

In the present study, we investigate the structural, morphological and magnetic properties of sol-gel spin-coated PZT thin films on alumina substrate. The morphotropic phase boundary (MPB) of PZT [Pb (Zr1-xTix)03] between the tetragonal and rhombohedral phases occurs at the Zr/Ti ratio of 52/48. At the MPB the physical properties of PZT are of far-reaching importance due to their possible crystalline phases. In this study Pb(Zr0.52Ti0.48)03 sols are prepared at room temperature and at 125 °C. The gels are coated onto alumina substrate using a spin-coating unit as two and three layers. The structural studies using XRD confirm the perovskite phase formation at an annealing temperature of 660 °C for both films. The structural parameter grain size, dislocation density, lattice parameters and strain were dependent on the sol temperature. The SEM morphology of the samples represents well-developed dense grain structure and thickness in micrometer ranges. The VSM analysis shows diamagnetic and ferromagnetic hysteresis loop. The ferromagnetism at low fields in PZT films is confirmed by studying the magnetic properties of powder made of the same gel. The effect of heat treatment on the gel preparation is observed on structural, morphological and magnetic properties of PZT thin films. The ferromagnetism in PZT can be attributed to oxygen vacancies. The squareness ratio of the films shows the application of the films as a high-density recording medium.

Damage-free patterning of ferroelectric lead zirconate titanate thin films for microelectromechanical systems via contact printing

NASA Astrophysics Data System (ADS)

Welsh, Aaron

This thesis describes the utilization and optimization of the soft lithographic technique, microcontact printing, to additively pattern ferroelectric lead zirconate titanate (PZT) thin films for application in microelectromechanical systems (MEMS). For this purpose, the solution wetting, pattern transfer, printing dynamics, stamp/substrate configurations, and processing damages were optimized for incorporation of PZT thin films into a bio-mass sensor application. This patterning technique transfers liquid ceramic precursors onto a device stack in a desired configuration either through pattern definition in the stamp, substrate or both surfaces. It was determined that for ideal transfer of the pattern from the stamp to the substrate surface, wetting between the solution and the printing surface is paramount. To this end, polyurethane-based stamp surfaces were shown to be wet uniformly by polar solutions. Patterned stamp surfaces revealed that printing from raised features onto flat substrates could be accomplished with a minimum feature size of 5 mum. Films patterned by printing as a function of thickness (0.1 to 1 mum) showed analogous functional properties to continuous films that were not patterned. Specifically, 1 mum thick PZT printed features had a relative permittivity of 1050 +/- 10 and a loss tangent of 2.0 +/- 0.4 % at 10 kHz; remanent polarization was 30 +/- 0.4 muC/cm 2 and the coercive field was 45 +/- 1 kV/cm; and a piezoelectric coefficient e31,f of -7 +/- 0.4 C/m2. No pinching in the minor hysteresis loops or splitting of the first order reversal curve (FORC) distributions was observed. Non-uniform distribution of the solution over the printed area becomes more problematic as feature size is decreased. This resulted in solutions printed from 5 mum wide raised features exhibiting a parabolic shape with sidewall angles of ˜ 1 degree. As an alternative, printing solutions from recesses in the stamp surface resulted in more uniform solution thickness transfer across the entire feature widths, with increased sidewall angles of ˜ 35 degrees. This was at the cost of degrading line edge definition from ˜ 200 nm to ˜ 500 nm. The loss of line edge definition was mitigated through the combined use of printing from stamp recesses onto raised substrate features. This allowed for printing of PZT features down to 1 mum wide. Solutions could also be transferred onto both fixed and free standing cantilever structures patterned into a substrate surface. Optimization of the stamp removal from the substrate was crucial in increasing sidewall angles of printed PZT films. It was determined that solutions gel once deposited onto the stamp before printing. As a result, printed films could not redistribute easily after transfer had occurred. Through a combination of varying peeling directions and peeling rates, it was possible to deposit thin film PZT on a pre patterned feature ˜ 1 mum wide with sidewall angles > 80 degrees. These printing techniques were utilized in printing a 250 nm thick 30/70 PZT onto prepatterned cantilever structures for use in a bio-functionalized, mass sensing resonating structure in collaboration with a bio-nanoelectromechincal sensing research group from the University of Toulouse, France. The features ranged in lateral size from 30 down to 1 mum. The printed devices exhibited a relative permittivity of 500 +/- 10 and a loss tangent of 0.9 +/- 0.1 %. The hysteresis loops were well formed, without pinching of the loops, and exhibited remanent polarizations of 24 +/- 0.5 muC/cm2, and coercive fields of 110 +/- 1 kV/cm. Dry etched features of the same size and thickness displayed a relative permittivity of 445 +/- 8 and a loss tangent of 0.9 +/- 0.1 %. The hysteresis loops exhibited pinched loops with remanent polarizations of 24 +/- 0.7 muC/cm2, and coercive fields of 112 +/- 2 kV/cm. Upon cycling, the dry etched films developed a 20 kV/cm imprint with reduced remanent polarizations to 20.5 +/- 0.5 muC/cm2 .

Modeling of delamination in carbon/epoxy composite laminates under four point bending for damage detection and sensor placement optimization

NASA Astrophysics Data System (ADS)

Adu, Stephen Aboagye

Laminated carbon fiber-reinforced polymer composites (CFRPs) possess very high specific strength and stiffness and this has accounted for their wide use in structural applications, most especially in the aerospace industry, where the trade-off between weight and strength is critical. Even though they possess much larger strength ratio as compared to metals like aluminum and lithium, damage in the metals mentioned is rather localized. However, CFRPs generate complex damage zones at stress concentration, with damage progression in the form of matrix cracking, delamination and fiber fracture or fiber/matrix de-bonding. This thesis is aimed at performing; stiffness degradation analysis on composite coupons, containing embedded delamination using the Four-Point Bend Test. The Lamb wave-based approach as a structural health monitoring (SHM) technique is used for damage detection in the composite coupons. Tests were carried-out on unidirectional composite coupons, obtained from panels manufactured with pre-existing defect in the form of embedded delamination in a laminate of stacking sequence [06/904/0 6]T. Composite coupons were obtained from panels, fabricated using vacuum assisted resin transfer molding (VARTM), a liquid composite molding (LCM) process. The discontinuity in the laminate structure due to the de-bonding of the middle plies caused by the insertion of a 0.3 mm thick wax, in-between the middle four (4) ninety degree (90°) plies, is detected using lamb waves generated by surface mounted piezoelectric (PZT) actuators. From the surface mounted piezoelectric sensors, response for both undamaged (coupon with no defect) and damaged (delaminated coupon) is obtained. A numerical study of the embedded crack propagation in the composite coupon under four-point and three-point bending was carried out using FEM. Model validation was then carried out comparing the numerical results with the experimental. Here, surface-to-surface contact property was used to model the composite coupon under simply supported boundary conditions. Theoretically calculated bending stiffness's and maximum deflection were compared with that of the experimental case and the numerical. After the FEA model was properly benchmarked with test data and exact solution, data obtained from the FEM model were used for sensor placement optimization.

Damage Identification in Beam Structure using Spatial Continuous Wavelet Transform

NASA Astrophysics Data System (ADS)

Janeliukstis, R.; Rucevskis, S.; Wesolowski, M.; Kovalovs, A.; Chate, A.

2015-11-01

In this paper the applicability of spatial continuous wavelet transform (CWT) technique for damage identification in the beam structure is analyzed by application of different types of wavelet functions and scaling factors. The proposed method uses exclusively mode shape data from the damaged structure. To examine limitations of the method and to ascertain its sensitivity to noisy experimental data, several sets of simulated data are analyzed. Simulated test cases include numerical mode shapes corrupted by different levels of random noise as well as mode shapes with different number of measurement points used for wavelet transform. A broad comparison of ability of different wavelet functions to detect and locate damage in beam structure is given. Effectiveness and robustness of the proposed algorithms are demonstrated experimentally on two aluminum beams containing single mill-cut damage. The modal frequencies and the corresponding mode shapes are obtained via finite element models for numerical simulations and by using a scanning laser vibrometer with PZT actuator as vibration excitation source for the experimental study.

Measurement of elasto-plastic deformations by speckle interferometry

NASA Astrophysics Data System (ADS)

Bova, Marco; Bruno, Luigi; Poggialini, Andrea

2010-09-01

In the paper the authors present an experimental equipment for elasto-plastic characterization of engineering materials by tensile tests. The stress state is imposed to a dog bone shaped specimen by a testing machine fixed on the optical table and designed for optimizing the performance of a speckle interferometer. All three displacement components are measured by a portable speckle interferometer fed by three laser diodes of 50 mW, by which the deformations of a surface of about 6×8 mm2 can be fully analyzed in details. All the equipment is driven by control electronics designed and realized on purpose, by which it is possible to accurately modify the intensity of the illumination sources, the position of a PZT actuator necessary for applying phase-shifting procedure, and the overall displacement applied to the specimen. The experiments were carried out in National Instrument LabVIEW environment, while the processing of the experimental data in Wolfram Mathematica environment. The paper reports the results of the elasto-plastic characterization of a high strength steel specimen.

Development of a New Utm (universal Testing Machine) System for the Nano/micro In-Process Measurement

NASA Astrophysics Data System (ADS)

Kweon, Hyunkyu; Choi, Sungdae; Kim, Youngsik; Nam, Kiho

Micro UTM (Universal Testing Machines) are becoming increasingly popular for testing the mechanical properties of MEMS materials, metal thin films, and micro-molecule materials1-2. And, new miniature testing machines that can perform in-process measurement in SEM, TEM, and SPM are also needed. In this paper, a new micro UTM with a precision positioning system that can be fine positioning stage. Coarse positioning is implemented by step motor. The size, load output and used in SEM, TEM, and SPM have been proposed. Bimorph type PZT precision actuator is used in displacement output of bimorph type UTM are 109×64×22(mm), about 35g, and 0.4 mm, respectively. And the displacement output is controlled in the block digital form. The results of the analysis and basic properties of positioning system and the UTM system are presented. In addition, the experiment results of in-process measurement during tensile load in SEM and AFM are showed.

Fatigue crack detection and identification by the elastic wave propagation method

NASA Astrophysics Data System (ADS)

Stawiarski, Adam; Barski, Marek; Pająk, Piotr

2017-05-01

In this paper the elastic wave propagation phenomenon was used to detect the initiation of the fatigue damage in isotropic plate with a circular hole. The safety and reliability of structures mostly depend on the effectiveness of the monitoring methods. The Structural Health Monitoring (SHM) system based on the active pitch-catch measurement technique was proposed. The piezoelectric (PZT) elements was used as an actuators and sensors in the multipoint measuring system. The comparison of the intact and defected structures has been used by damage detection algorithm. One part of the SHM system has been responsible for detection of the fatigue crack initiation. The second part observed the evolution of the damage growth and assess the size of the defect. The numerical results of the wave propagation phenomenon has been used to present the effectiveness and accuracy of the proposed method. The preliminary experimental analysis has been carried out during the tension test of the aluminum plate with a circular hole to determine the efficiency of the measurement technique.

Damage detection and locating using tone burst and continuous excitation modulation method

NASA Astrophysics Data System (ADS)

Li, Zheng; Wang, Zhi; Xiao, Li; Qu, Wenzhong

2014-03-01

Among structural health monitoring techniques, nonlinear ultrasonic spectroscopy methods are found to be effective diagnostic approach to detecting nonlinear damage such as fatigue crack, due to their sensitivity to incipient structural changes. In this paper, a nonlinear ultrasonic modulation method was developed to detect and locate a fatigue crack on an aluminum plate. The method is different with nonlinear wave modulation method which recognizes the modulation of low-frequency vibration and high-frequency ultrasonic wave; it recognizes the modulation of tone burst and high-frequency ultrasonic wave. In the experiment, a Hanning window modulated sinusoidal tone burst and a continuous sinusoidal excitation were simultaneously imposed on the PZT array which was bonded on the surface of an aluminum plate. The modulations of tone burst and continuous sinusoidal excitation was observed in different actuator-sensor paths, indicating the presence and location of fatigue crack. The results of experiments show that the proposed method is capable of detecting and locating the fatigue crack successfully.

Experimental Study on Damage Detection in Timber Specimens Based on an Electromechanical Impedance Technique and RMSD-Based Mahalanobis Distance

PubMed Central

Wang, Dansheng; Wang, Qinghua; Wang, Hao; Zhu, Hongping

2016-01-01

In the electromechanical impedance (EMI) method, the PZT patch performs the functions of both sensor and exciter. Due to the high frequency actuation and non-model based characteristics, the EMI method can be utilized to detect incipient structural damage. In recent years EMI techniques have been widely applied to monitor the health status of concrete and steel materials, however, studies on application to timber are limited. This paper will explore the feasibility of using the EMI technique for damage detection in timber specimens. In addition, the conventional damage index, namely root mean square deviation (RMSD) is employed to evaluate the level of damage. On that basis, a new damage index, Mahalanobis distance based on RMSD, is proposed to evaluate the damage severity of timber specimens. Experimental studies are implemented to detect notch and hole damage in the timber specimens. Experimental results verify the availability and robustness of the proposed damage index and its superiority over the RMSD indexes. PMID:27782088

Experimental Study on Damage Detection in Timber Specimens Based on an Electromechanical Impedance Technique and RMSD-Based Mahalanobis Distance.

PubMed

Wang, Dansheng; Wang, Qinghua; Wang, Hao; Zhu, Hongping

2016-10-22

In the electromechanical impedance (EMI) method, the PZT patch performs the functions of both sensor and exciter. Due to the high frequency actuation and non-model based characteristics, the EMI method can be utilized to detect incipient structural damage. In recent years EMI techniques have been widely applied to monitor the health status of concrete and steel materials, however, studies on application to timber are limited. This paper will explore the feasibility of using the EMI technique for damage detection in timber specimens. In addition, the conventional damage index, namely root mean square deviation (RMSD) is employed to evaluate the level of damage. On that basis, a new damage index, Mahalanobis distance based on RMSD, is proposed to evaluate the damage severity of timber specimens. Experimental studies are implemented to detect notch and hole damage in the timber specimens. Experimental results verify the availability and robustness of the proposed damage index and its superiority over the RMSD indexes.

Energy Harvesting with Coupled Magnetorestrictive Resonators

DTIC Science & Technology

2013-09-01

matching, small hysteresis, and low coercivity2. Ceramic material like PZT tends to develop fatigue during its cycles whereas Galfenol does not have...Magnetostrictive Material PZT Pb [ZrxTi1-x] O3, 0<xə, Lead Zirconate Titanate RX Receiver SHM Structural Health Monitoring...zirconate titanate [ PZT ]) have lead in their fabrication process, which is an environmental risk. Another major issue with standard energy

IIR filtering based adaptive active vibration control methodology with online secondary path modeling using PZT actuators

NASA Astrophysics Data System (ADS)

Boz, Utku; Basdogan, Ipek

2015-12-01

Structural vibrations is a major cause for noise problems, discomfort and mechanical failures in aerospace, automotive and marine systems, which are mainly composed of plate-like structures. In order to reduce structural vibrations on these structures, active vibration control (AVC) is an effective approach. Adaptive filtering methodologies are preferred in AVC due to their ability to adjust themselves for varying dynamics of the structure during the operation. The filtered-X LMS (FXLMS) algorithm is a simple adaptive filtering algorithm widely implemented in active control applications. Proper implementation of FXLMS requires availability of a reference signal to mimic the disturbance and model of the dynamics between the control actuator and the error sensor, namely the secondary path. However, the controller output could interfere with the reference signal and the secondary path dynamics may change during the operation. This interference problem can be resolved by using an infinite impulse response (IIR) filter which considers feedback of the one or more previous control signals to the controller output and the changing secondary path dynamics can be updated using an online modeling technique. In this paper, IIR filtering based filtered-U LMS (FULMS) controller is combined with online secondary path modeling algorithm to suppress the vibrations of a plate-like structure. The results are validated through numerical and experimental studies. The results show that the FULMS with online secondary path modeling approach has more vibration rejection capabilities with higher convergence rate than the FXLMS counterpart.

A Facile Synthesis of Dynamic, Shape Changing Polymer Particles

PubMed Central

Klinger, Daniel; Wang, Cynthia; Connal, Luke A.; Audus, Debra J.; Jang, Se Gyu; Kraemer, Stephan; Killops, Kato L.; Fredrickson, Glenn H.; Kramer, Edward J.; Hawker, Craig J.

2014-01-01

We herein report a new facile strategy to ellipsoidal block copolymer nanoparticles exhibiting a pH-triggered anistropic swelling profile. In a first step, elongated particles with an axially stacked lamellae structure are selectively prepared by utilizing functional surfactants to control the phase separation of symmetric PS-b-P2VP in dispersed droplets. In a second step, the dynamic shape change is realized by crosslinking the P2VP domains, hereby connecting glassy PS discs with pH-sensitive hydrogel actuators. PMID:24700705

Shock-Absorbent Ball-Screw Mechanism

NASA Technical Reports Server (NTRS)

Hirr, Otto A., Jr.; Meneely, R. W.

1986-01-01

Actuator containing two ball screws in series employs Belleville springs to reduce impact loads, thereby increasing life expectancy. New application of springs increases reliability of equipment in which ball screws commonly used. Set of three springs within lower screw of ball-screw mechanism absorbs impacts that result when parts reach their upper and lower limits of movement. Mechanism designed with Belleville springs as shock-absorbing elements because springs have good energy-to-volume ratio and easily stacked to attain any stiffness and travel.

An optimized strain demodulation method for PZT driven fiber Fabry-Perot tunable filter

NASA Astrophysics Data System (ADS)

Sheng, Wenjuan; Peng, G. D.; Liu, Yang; Yang, Ning

2015-08-01

An optimized strain-demodulation-method based on piezo-electrical transducer (PZT) driven fiber Fabry-Perot (FFP) filter is proposed and experimentally demonstrated. Using a parallel processing mode to drive the PZT continuously, the hysteresis effect is eliminated, and the system demodulation rate is increased. Furthermore, an AC-DC compensation method is developed to address the intrinsic nonlinear relationship between the displacement and voltage of PZT. The experimental results show that the actual demodulation rate is improved from 15 Hz to 30 Hz, the random error of the strain measurement is decreased by 95%, and the deviation between the test values after compensation and the theoretical values is less than 1 pm/με.

Influence of polarized PZT on the crystal growth of calcium phosphate

NASA Astrophysics Data System (ADS)

Sun, Xiaodan; Ma, Chunlai; Wang, Yude; Li, Hengde

2002-01-01

The effects of polarization on the crystallization of calcium phosphate are studied in this work. Crystals of calcium phosphate from saturated solution of hydroxyapatite (HA, Ca 10(PO 4) 6(OH) 2) were deposited on the surfaces of ferroelectric ceramics lead zirconate titanium (Pb(Ti,Zr)O 3, PZT). The results of the experiment demonstrated the acceleration effects of polarized PZT on the crystal growth of calcium phosphate. Furthermore, it is indicated that polarization also influenced the orientation of the deposited crystals due to the growth of a layer of (0 0 2) oriented octacalcium phosphate (OCP, Ca 8H 2(PO 4) 6·5H 2O) on the negatively charged surfaces of PZT.

Novel Photovoltaic Devices Using Ferroelectric Material and Colloidal Quantum Dots

NASA Astrophysics Data System (ADS)

Paik, Young Hun

As the global concern for the financial and environmental costs of traditional energy resources increases, research on renewable energy, most notably solar energy, has taken center stage. Many alternative photovoltaic (PV) technologies for 'the next generation solar cell' have been extensively studied to overcome the Shockley-Queisser 31% efficiency limit as well as tackle the efficiency vs. cost issues. This dissertation focuses on the novel photovoltaic mechanism for the next generation solar cells using two inorganic nanomaterials, nanocrystal quantum dots and ferroelectric nanoparticles. Lead zirconate titanate (PZT) materials are widely studied and easy to synthesize using solution based chemistry. One of the fascinating properties of the PZT material is a Bulk Photovoltaic effect (BPVE). This property has been spotlighted because it can produce very high open circuit voltage regardless of the electrical bandgap of the materials. However, the poor optical absorption of the PZT materials and the required high temperature to form the ferroelectric crystalline structure have been obstacles to fabricate efficient photovoltaic devices. Colloidal quantum dots also have fascinating optical and electrical properties such as tailored absorption spectrum, capability of the bandgap engineering due to the wide range of material selection and quantum confinement, and very efficient carrier dynamics called multiple exciton generations. In order to utilize these properties, many researchers have put numerous efforts in colloidal quantum dot photovoltaic research and there has been remarkable progress in the past decade. However, several drawbacks are still remaining to achieve highly efficient photovoltaic device. Traps created on the large surface area, low carrier mobility, and lower open circuit voltage while increasing the absorption of the solar spectrum is main issues of the nanocrystal based photovoltaic effect. To address these issues and to take the advantages of the two materials, this dissertation focused on material synthesis for low cost solution process for both materials, fabrication of various device structures and electrical/optical characterization to understand the underlying physics. We successfully demonstrated lead sulfide quantum dots (PbS QDs) and lead zirconate titanate nanoparticles (PZT NPs) in an aqueous solution and fabricated a photosensitive device. Solution based low-temperature process was used to fabricate a PbS QD and a PZT NP device. We exhibited a superior photoresponse and ferroelectric photovoltaic properties with the novel PZT NP device and studied the physics on domain wall effect and internal polarity effect. PZT NP was mainly investigated because PZT NP device is the first report as a photosensitive device with a successful property demonstration, as we know of. PZT's crystalline structure and the size of the nanocrystals were studied using X-ray diffraction and TEM (Transmission electron microscopy) respectively. We observed < 100 nm of PZT NPs and this result matched with DLS (dynamic light scattering) measurement. We fabricated ferroelectric devices using the PZT NPs for the various optical and electrical characterizations and verified ferroelectric properties including ferroelectric hysteresis loop. We also observed a typical ferroelectric photovoltaic effect from a PZT NP based device which was fabricated on an ITO substrate. We synthesized colloidal quantum dots (CQD) with the inexpensive soluble process. Fabricated PbS QD was used for the hybrid device with PZT thin films. J-V measured and the result shows superior open circuit voltage characteristics compared to conventional PbS QD PV devices, and resulting the improvement of the solar cell efficiency. This Ferroelectrics and Quantum Dots (FE-QDs) device also the first trial and the success as we know of.

Mechanical and electrical strain response of a piezoelectric auxetic PZT lattice structure

NASA Astrophysics Data System (ADS)

Fey, Tobias; Eichhorn, Franziska; Han, Guifang; Ebert, Kathrin; Wegener, Moritz; Roosen, Andreas; Kakimoto, Ken-ichi; Greil, Peter

2016-01-01

A two-dimensional auxetic lattice structure was fabricated from a PZT piezoceramic. Tape casted and sintered sheets with a thickness of 530 μm were laser cut into inverted honeycomb lattice structure with re-entrant cell geometry (θ = -25°) and poling direction oriented perpendicular to the lattice plane. The in-plane strain response upon applying an uniaxial compression load as well as an electric field perpendicular to the lattice plane were analyzed by a 2D image data detection analysis. The auxetic lattice structure exhibits orthotropic deformation behavior with a negative in-plane Poisson’s ratio of -2.05. Compared to PZT bulk material the piezoelectric auxetic lattice revealed a strain amplification by a factor of 30-70. Effective transversal coupling coefficients {{d}al}31 of the PZT lattice exceeding 4 × 103 pm V-1 were determined which result in an effective hydrostatic coefficient {{d}al}h 66 times larger than that of bulk PZT.

Quantification of temperature effect on impedance monitoring via PZT interface for prestressed tendon anchorage

NASA Astrophysics Data System (ADS)

Huynh, Thanh-Canh; Kim, Jeong-Tae

2017-12-01

In this study, the quantification of temperature effect on impedance monitoring via a PZT interface for prestressed tendon-anchorage is presented. Firstly, a PZT interface-based impedance monitoring technique is selected to monitor impedance signatures by predetermining sensitive frequency bands. An analytical model is designed to represent coupled dynamic responses of the PZT interface-tendon anchorage system. Secondly, experiments on a lab-scaled tendon anchorage are described. Impedance signatures are measured via the PZT interface for a series of temperature and prestress-force changes. Thirdly, temperature effects on measured impedance responses of the tendon anchorage are estimated by quantifying relative changes in impedance features (such as RMSD and CCD indices) induced by temperature variation and prestress-force change. Finally, finite element analyses are conducted to investigate the mechanism of temperature variation and prestress-loss effects on the impedance responses of prestressed tendon anchorage. Temperature effects on impedance monitoring are filtered by effective frequency shift-based algorithm for distinguishing prestress-loss effects on impedance signatures.

Electrical response of Pt/Ru/PbZr0.52Ti0.48O3/Pt capacitor as function of lead precursor excess

NASA Astrophysics Data System (ADS)

Gueye, Ibrahima; Le Rhun, Gwenael; Renault, Olivier; Defay, Emmanuel; Barrett, Nicholas

2017-11-01

We investigated the influence of the surface microstructure and chemistry of sol-gel grown PbZr0.52Ti0.48O3 (PZT) on the electrical performance of PZT-based metal-insulator-metal (MIM) capacitors as a function of Pb precursor excess. Using surface-sensitive, quantitative X-ray photoelectron spectroscopy and scanning electron microscopy, we confirm the presence of ZrOx surface phase. Low Pb excess gives rise to a discontinuous layer of ZrOx on a (100) textured PZT film with a wide band gap reducing the capacitance of PZT-based MIMs whereas the breakdown field is enhanced. At high Pb excess, the nanostructures disappear while the PZT grain size increases and the film texture becomes (111). Concomitantly, the capacitance density is enhanced by 8.7%, and both the loss tangent and breakdown field are reduced by 20 and 25%, respectively. The role of the low permittivity, dielectric interface layer on capacitance and breakdown is discussed.

Flexible graphene-PZT ferroelectric nonvolatile memory.

PubMed

Lee, Wonho; Kahya, Orhan; Toh, Chee Tat; Ozyilmaz, Barbaros; Ahn, Jong-Hyun

2013-11-29

We report the fabrication of a flexible graphene-based nonvolatile memory device using Pb(Zr0.35,Ti0.65)O3 (PZT) as the ferroelectric material. The graphene and PZT ferroelectric layers were deposited using chemical vapor deposition and sol–gel methods, respectively. Such PZT films show a high remnant polarization (Pr) of 30 μC cm−2 and a coercive voltage (Vc) of 3.5 V under a voltage loop over ±11 V. The graphene–PZT ferroelectric nonvolatile memory on a plastic substrate displayed an on/off current ratio of 6.7, a memory window of 6 V and reliable operation. In addition, the device showed one order of magnitude lower operation voltage range than organic-based ferroelectric nonvolatile memory after removing the anti-ferroelectric behavior incorporating an electrolyte solution. The devices showed robust operation in bent states of bending radii up to 9 mm and in cycling tests of 200 times. The devices exhibited remarkable mechanical properties and were readily integrated with plastic substrates for the production of flexible circuits.

Conventional and two step sintering of PZT-PCN ceramics

NASA Astrophysics Data System (ADS)

Keshavarzi, Mostafa; Rahmani, Hooman; Nemati, Ali; Hashemi, Mahdieh

2018-02-01

In this study, PZT-PCN ceramic was made via sol-gel seeding method and effects of conventional sintering (CS) as well as two-step sintering (TSS) were investigated on microstructure, phase formation, density, dielectric and piezoelectric properties. First, high quality powder was achieved by seeding method in which the mixture of Co3O4 and Nb2O5 powder was added to the prepared PZT sol to form PZT-PCN gel. After drying and calcination, pyrochlore free PZT-PCN powder was synthesized. Second, CS and TSS were applied to achieve dense ceramic. The optimum temperature used for 2 h of conventional sintering was obtained at 1150 °C; finally, undesired ZrO2 phase formed in CS procedure was removed successfully with TSS procedure and dielectric and piezoelectric properties were improved compared to the CS procedure. The best electrical properties obtained for the sample sintered by TSS in the initial temperature of T 1 = 1200 °C and secondary temperature of T 2 = 1000 °C for 12 h.

Nanogenerators consisting of direct-grown piezoelectrics on multi-walled carbon nanotubes using flexoelectric effects

PubMed Central

Han, Jin Kyu; Jeon, Do Hyun; Cho, Sam Yeon; Kang, Sin Wook; Yang, Sun A.; Bu, Sang Don; Myung, Sung; Lim, Jongsun; Choi, Moonkang; Lee, Minbaek; Lee, Min Ku

2016-01-01

We report the first attempt to prepare a flexoelectric nanogenerator consisting of direct-grown piezoelectrics on multi-walled carbon nanotubes (mwCNT). Direct-grown piezoelectrics on mwCNTs are formed by a stirring and heating method using a Pb(Zr0.52Ti0.48)O3 (PZT)-mwCNT precursor solution. We studied the unit cell mismatch and strain distribution of epitaxial PZT nanoparticles, and found that lattice strain is relaxed along the growth direction. A PZT-mwCNT nanogenerator was found to produce a peak output voltage of 8.6 V and an output current of 47 nA when a force of 20 N is applied. Direct-grown piezoelectric nanogenerators generate a higher voltage and current than simple mixtures of PZT and CNTs resulting from the stronger connection between PZT crystals and mwCNTs and an enhanced flexoelectric effect caused by the strain gradient. These experiments represent a significant step toward the application of nanogenerators using piezoelectric nanocomposite materials. PMID:27406631

Oxygen vacancy as fatigue evidence of La0.5Sr0.5CoO3/PbZr0.4Ti0.6O3/La0.5Sr0.5CoO3 capacitors

NASA Astrophysics Data System (ADS)

Liu, B. T.; Chen, J. E.; Sun, J.; Wei, D. Y.; Chen, J. H.; Li, X. H.; Bian, F.; Zhou, Y.; Guo, J. X.; Zhao, Q. X.; Guan, L.; Wang, Y. L.; Guo, Q. L.; Ma, L. X.

2010-09-01

La0.5Sr0.5CoO3 (LSCO) films grown on SrTiO3 substrates, cooled at reduced oxygen pressures, ranging from 8×104 to 1×10-4 Pa, from the depostion temperature, are used as the bottom electrodes of PbZr0.4Ti0.6O3 (PZT) capacitors to study the impact of oxygen stoichiometry of the LSCO bottom electrodes on the structural and physical properties of LSCO/PZT/LSCO capacitors. It is found that the tetragonality, polarization and fatigue-resistance of PZT films decrease with the decrease of the cooling oxygen pressure. Almost 60% polarization degradation occurs for the PZT capacitor with the LSCO bottom electrode cooled in 1×10-4 Pa oxygen up to 1010 switching cycles, indicating that the oxygen vacancy of the bottom electrode can result in fatigue of the LSCO/PZT/LSCO capacitor.

Ferroelectric polymer-ceramic composite thick films for energy storage applications

DOE Office of Scientific and Technical Information (OSTI.GOV)

Singh, Paritosh; Borkar, Hitesh; Singh, B. P.

2014-08-15

We have successfully fabricated large area free standing polyvinylidene fluoride -Pb(Zr{sub 0.52}Ti{sub 0.48})O{sub 3} (PVDF-PZT) ferroelectric polymer-ceramic composite (wt% 80–20, respectively) thick films with an average diameter (d) ∼0.1 meter and thickness (t) ∼50 μm. Inclusion of PZT in PVDF matrix significantly enhanced dielectric constant (from 10 to 25 at 5 kHz) and energy storage capacity (from 11 to 14 J/cm{sup 3}, using polarization loops), respectively, and almost similar leakage current and mechanical strength. Microstructural analysis revealed the presence of α and β crystalline phases and homogeneous distribution of PZT crystals in PVDF matrix. It was also found that apartmore » from the microcrystals, well defined naturally developed PZT nanocrystals were embedded in PVDF matrix. The observed energy density indicates immense potential in PVDF-PZT composites for possible applications as green energy and power density electronic elements.« less

Hot-Spot Fatigue and Impact Damage Detection on a Helicopter Tailboom

DTIC Science & Technology

2011-09-01

other 14 PZT disks were used as sensors. Among the 28 PZT disks, 16 PZT disks were placed in the two fatigue hot-spot areas to detect cracks initiated...more efficient and effective airframe maintenance, fatigue cracking and impact damage detection technologies were developed and demonstrated on a...SHM system in successfully monitoring fatigue cracks initiated from cyclical loading conditions; detecting, locating and quantifying ballistic

Vertically Free-Standing Ordered Pb(Zr0.52Ti0.48)O3 Nanocup Arrays by Template-Assisted Ion Beam Etching

NASA Astrophysics Data System (ADS)

Zhang, Xiaoyan; Tang, Dan; Huang, Kangrong; Hu, Die; Zhang, Fengyuan; Gao, Xingsen; Lu, Xubing; Zhou, Guofu; Zhang, Zhang; Liu, Junming

2016-04-01

In this report, vertically free-standing lead zirconate titanate Pb(Zr0.52Ti0.48)O3 (PZT) nanocup arrays with good ordering and high density (1.3 × 1010 cm-2) were demonstrated. By a template-assisted ion beam etching (IBE) strategy, the PZT formed in the pore-through anodic aluminum oxide (AAO) membrane on the Pt/Si substrate was with a cup-like nanostructure. The mean diameter and height of the PZT nanocups (NCs) was about 80 and 100 nm, respectively, and the wall thickness of NCs was about 20 nm with a hole depth of about 80 nm. Uppermost, the nanocup structure with low aspect ratio realized vertically free-standing arrays when losing the mechanical support from templates, avoiding the collapse or bundling when compared to the typical nanotube arrays. X-ray diffraction (XRD) and Raman spectrum revealed that the as-prepared PZT NCs were in a perovskite phase. By the vertical piezoresponse force microscopy (VPFM) measurements, the vertically free-standing ordered ferroelectric PZT NCs showed well-defined ring-like piezoresponse phase and hysteresis loops, which indicated that the high-density PZT nanocup arrays could have potential applications in ultra-high non-volatile ferroelectric memories (NV-FRAM) or other nanoelectronic devices.

Underwater characterizations of monolithic piezoceramic and 1-3 composite using a self-designed transducer

NASA Astrophysics Data System (ADS)

Saleem Mirza, Muhammad; Yasin, Tariq; Ikram, Masroor; Altaf, Muhammad; Mushtaq, Zahir; Nasir Khan, Muhammad

2016-03-01

Underwater characterizations of (Pb0.94Sr0.04)(Zr0.52Ti0.48)O3 (PZT) and PZT/araldite-F 1-3 composite were carried out through a self-designed transducer. Disc-shaped samples of bulk PZT and PZT/araldite-F composite were first characterized in air and then were assembled in the transducer individually. The transducer's underwater voltage receiving sensitivity (Sh) and transmitting voltage response (Sv) were investigated in the frequency range of 10-200 kHz (well below thickness mode resonance) using a calibrated projector and receiver method with pulse technique. Results revealed that the transducer made with composite sample exhibited better (Sh) values (-214 dB ref 1 V/µPa) due to ~295% higher piezoelectric voltage coefficient gh (30 × 10-3 Vm/N) of the composite compared to PZT. In addition, the transducer with the PZT sample showed better Sv values (80 dB ref 1 µPa/1 V at 1 m) due to the presence of planar mode peaks in the frequency range of 10-200 kHz. These results indicate that the monolithic piezoceramic can exhibit underwater Sv response in both planar and thickness resonance modes owing to the admittance peaks in these frequency regions.

Effects of sintering temperature on the pyrochlore phase in PZT nanotubes and their transformation to the perovskite phase by coating with PbO multilayers.

PubMed

Han, Jin Kyu; Choi, Yong Chan; Jeon, Do Hyen; Lee, Min Ku; Bu, Sang Don

2014-11-01

We report the phase evolution of Pb(Zr0.52Ti0.48)O3 nanotubes (PZT-NTs), from the pyrochlore to perovskite phase, with an outer diameter of about 420 nm and a wall thickness of about 10 nm. The PZT-NTs were fabricated in pores of porous anodic alumina membrane (PAM) using a spin coating of PZT sol-gel solution and subsequent annealing at 500-700 degrees C in oxygen gas. The pyrochlore phase was found to be formed at 500 degrees C, and also found not to be transformed into the perovskite phase, even though annealing was performed at higher temperatures to 700 degrees C. Elementary distribution analysis of PZT-NTs embedded in PAM reveal that Pb diffusion from nanotubes into pore walls of PAM is one of the main reasons. By employing firstly an additional PbO coating on the pyrochlore nanotubes and then subsequent annealing at 700 degrees C, we have successfully achieved an almost pure perovskite phase in nanotubes. These results suggest that PbO acts as a Pb-compensation agent in the Pb- deficient PZT-NTs. Moreover, our method can be used in the synthesis of all metal-oxide materials, including volatile elements.

Graphene - ferroelectric and MoS2 - ferroelectric heterostructures for memory applications

NASA Astrophysics Data System (ADS)

Lipatov, Alexey; Sharma, Pankaj; Gruverman, Alexei; Sinitskii, Alexander

In recent years there has been an unprecedented interest in two-dimensional (2D) materials with unique physical and chemical properties that cannot be found in their three-dimensional (3D) counterparts. One of the important advantages of 2D materials is that they can be easily integrated with other 2D materials and functional films, resulting in multilayered structures with new properties. We fabricated and tested electronic and memory properties of field-effect transistors (FETs) based on a single-layer graphene combined with lead zirconium titanate (PZT) substrate. Previously studied graphene-PZT devices exhibited an unusual electronic behavior such as clockwise hysteresis of electronic transport, in contradiction with counterclockwise polarization dependence of PZT. We investigated how the interplay of polarization and interfacial phenomena affects the electronic behavior and memory characteristics of graphene-PZT FETs, explain the origin of unusual clockwise hysteresis and experimentally demonstrate a reversed polarization-dependent hysteresis of electronic transport. In addition we fabricated and tested properties of MoS2-PZT FETs which exhibit a large hysteresis of electronic transport with high ON/OFF ratios. We demonstrate that MoS2-PZT memories have a number of advantages over commercial FeRAMs, such as nondestructive data readout, low operation voltage, wide memory window and the possibility to write and erase them both electrically and optically.

Ferroelectric Polarization-Modulated Interfacial Fine Structures Involving Two-Dimensional Electron Gases in Pb(Zr,Ti)O3/LaAlO3/SrTiO3 Heterostructures.

PubMed

Wang, Shuangbao; Bai, Yuhang; Xie, Lin; Li, Chen; Key, Julian D; Wu, Di; Wang, Peng; Pan, Xiaoqing

2018-01-10

Interfacial fine structures of bare LaAlO 3 /SrTiO 3 (LAO/STO) heterostructures are compared with those of LAO/STO heterostructures capped with upward-polarized Pb(Zr 0.1 ,Ti 0.9 )O 3 (PZT up ) or downward-polarized Pb(Zr 0.5 ,Ti 0.5 )O 3 (PZT down ) overlayers by aberration-corrected scanning transmission electron microscopy experiments. By combining the acquired electron energy-loss spectroscopy mapping, we are able to directly observe electron transfer from Ti 4+ to Ti 3+ and ionic displacements at the interface of bare LAO/STO and PZT down /LAO/STO heterostructure unit cell by unit cell. No evidence of Ti 3+ is observed at the interface of the PZT up /LAO/STO samples. Furthermore, the confinement of the two-dimensional electron gas (2DEG) at the interface is determined by atomic-column spatial resolution. Compared with the bare LAO/STO interface, the 2DEG density at the LAO/STO interface is enhanced or depressed by the PZT down or PZT up overlayer, respectively. Our microscopy studies shed light on the mechanism of ferroelectric modulation of interfacial transport at polar/nonpolar oxide heterointerfaces, which may facilitate applications of these materials as nonvolatile memory.