Sample records for remote pecvd process

  1. Effects of Deposition Parameters on Thin Film Properties of Silicon-Based Electronic Materials Deposited by Remote Plasma-Enhanced Chemical-Vapor Deposition

    NASA Astrophysics Data System (ADS)

    Theil, Jeremy Alfred

    The motivation of this thesis is to discuss the major issues of remote plasma enhanced chemical vapor deposition (remote PECVD) that affect the properties Si-based thin films. In order to define the issues required for process optimization, the behavior of remote PECVD process must be understood. The remote PECVD process is defined as having four segments: (1) plasma generation, (2) excited species extraction, (3) excited species/downstream gas mixing, and (4) surface reaction. The double Langmuir probe technique is employed to examine plasma parameters under 13.56 MHz and 2.54 GHz excitation. Optical emission spectroscopy is used to determine changes in the excited states of radiating species in the plasma afterglow. Mass spectrometry is used to determine the excitation and consumption of process gases within the reactor during film growth. Various analytical techniques such as infrared absorption spectroscopy, (ir), high resolution transmission electron microscopy, (HRTEM), and reflected high energy electron diffraction, (RHEED), are used to ascertain film properties. The results of the Langmuir probe show that plasma coupling is frequency dependent and that the capacitive coupling mode is characterized by orders of magnitude higher electron densities in the reactor than inductive coupling. These differences can be manifested in the degree to which a hydrogenated amorphous silicon, a-Si:H, component co-deposition reaction affects film stoichiometry. Mass spectrometry shows that there is an additional excitation source in the downstream glow. In addition the growth of microcrystalline silicon, muc-Si, is correlated with the decrease in the production of disilane and heavier Si-containing species. Chloronium, H_2 Cl^{+}, a super acid ion is identified for the first time in a CVD reactor. It forms from plasma fragmentation of SiH_2 Cl_2, and H_2 . Addition of impurity gases was shown not to affect the electron temperature of the plasma. By products of deposition reactions can affect film properties by post -deposition reactions with the film. In the case of SiO _2 film growth, residual H _2O is shown to create OH groups within the film by reacting with distorted Si-O-Si bonding groups.

  2. Flexible amorphous silicon PIN diode x-ray detectors

    NASA Astrophysics Data System (ADS)

    Marrs, Michael; Bawolek, Edward; Smith, Joseph T.; Raupp, Gregory B.; Morton, David

    2013-05-01

    A low temperature amorphous silicon (a-Si) thin film transistor (TFT) and amorphous silicon PIN photodiode technology for flexible passive pixel detector arrays has been developed using active matrix display technology. The flexible detector arrays can be conformed to non-planar surfaces with the potential to detect x-rays or other radiation with an appropriate conversion layer. The thin, lightweight, and robust backplanes may enable the use of highly portable x-ray detectors for use in the battlefield or in remote locations. We have fabricated detector arrays up to 200 millimeters along the diagonal on a Gen II (370 mm x 470 mm rectangular substrate) using plasma enhanced chemical vapor deposition (PECVD) a-Si as the active layer and PECVD silicon nitride (SiN) as the gate dielectric and passivation. The a-Si based TFTs exhibited an effective saturation mobility of 0.7 cm2/V-s, which is adequate for most sensing applications. The PIN diode material was fabricated using a low stress amorphous silicon (a-Si) PECVD process. The PIN diode dark current was 1.7 pA/mm2, the diode ideality factor was 1.36, and the diode fill factor was 0.73. We report on the critical steps in the evolution of the backplane process from qualification of the low temperature (180°C) TFT and PIN diode process on the 150 mm pilot line, the transfer of the process to flexible plastic substrates, and finally a discussion and demonstration of the scale-up to the Gen II (370 x 470 mm) panel scale pilot line.

  3. Hydrogen dissociation in the deposition of GaN films with ECR-PECVD process

    NASA Astrophysics Data System (ADS)

    Fu, S. L.; Wang, C. A.; Ding, L. C.; Qin, Y. X.

    2018-05-01

    The hydrogen dissociation and its effect on the GaN film growth in the ECR-PECVD process are investigated in this paper. We use N2 and trimethylgallium (TMG) as N and Ga sources respectively in the ECR- PECVD process. The results show that the rate of hydrogen dissociation increases with the microwave power and it becomes higher at high microwave power (> 500 W). However, this population increase of the H species dissociated from the TMG gas in ECR plasma is not enough to change the growth condition from Ga-rich to N-rich.

  4. Low-stress PECVD amorphous silicon carbide (α-SiC) layers for biomedical application

    NASA Astrophysics Data System (ADS)

    Wei, Jiashen; Chen, Bangtao; Poenar, Daniel P.; Lee, Yong Yeow; Iliescu, Ciprian

    2008-12-01

    A detailed characterization of PECVD to produce low stress amorphous silicon carbide (α-SiC) layers at high deposition rate has been done and the biomedical applications of α-SiC layers are reported in this paper. By investigating different working principles in high-frequency mode (13.56MHz) and in low frequency mode (380KHz), it is found that deposition in high-frequency mode can achieve low stress layers at high deposition rates due to the structural rearrangement from high HF power, rather than the ion bombardment effect from high LF power which results in high compressive stress for α-SiC layers. Furthermore, the effects of deposition temperature, pressure and reactant gas ratios are also investigated and then an optimal process is achieved to produce low stress α-SiC layers with high deposition rates. To characterize the PECVD α-SiC layers from optimized process, a series of wet etching experiments in KOH and HF solutions have been completed. The very low etching rates of PECVD α-SiC layers in these two solutions show the good chemical inertness and suitability for masking layers in micromachining. Moreover, cell culture tests by seeding fibroblast NIH3T3 cells on the monocrystalline SiC, low-stress PECVD α-SiC released membranes and non-released PECVD α-SiC films on silicon substrates have been done to check the feasibility of PECVD α-SiC layers as substrate materials for biomedical applications. The results indicate that PECVD α-SiC layers are good for cell culturing, especially after treated in NH4F.

  5. Two dimensional radial gas flows in atmospheric pressure plasma-enhanced chemical vapor deposition

    NASA Astrophysics Data System (ADS)

    Kim, Gwihyun; Park, Seran; Shin, Hyunsu; Song, Seungho; Oh, Hoon-Jung; Ko, Dae Hong; Choi, Jung-Il; Baik, Seung Jae

    2017-12-01

    Atmospheric pressure (AP) operation of plasma-enhanced chemical vapor deposition (PECVD) is one of promising concepts for high quality and low cost processing. Atmospheric plasma discharge requires narrow gap configuration, which causes an inherent feature of AP PECVD. Two dimensional radial gas flows in AP PECVD induces radial variation of mass-transport and that of substrate temperature. The opposite trend of these variations would be the key consideration in the development of uniform deposition process. Another inherent feature of AP PECVD is confined plasma discharge, from which volume power density concept is derived as a key parameter for the control of deposition rate. We investigated deposition rate as a function of volume power density, gas flux, source gas partial pressure, hydrogen partial pressure, plasma source frequency, and substrate temperature; and derived a design guideline of deposition tool and process development in terms of deposition rate and uniformity.

  6. Lattice Matched Iii-V IV Semiconductor Heterostructures: Metalorganic Chemical Vapor Deposition and Remote Plasma Enhanced Chemical Vapor Deposition.

    NASA Astrophysics Data System (ADS)

    Choi, Sungwoo

    1992-01-01

    This thesis describes the growth and characterization of wide gap III-V compound semiconductors such as aluminum gallium arsenide (Al_{rm x} Ga_{rm 1-x}As), gallium nitride (GaN), and gallium phosphide (GaP), deposited by the metalorganic chemical vapor deposition (MOCVD) and remote plasma enhanced chemical vapor deposition (Remote PECVD). In the first part of the thesis, the optimization of GaAs and Al_{rm x}Ga _{rm 1-x}As hetero -epitaxial layers on Ge substrates is described in the context of the application in the construction of cascade solar cells. The emphasis on this study is on the trade-offs in the choice of the temperature related to increasing interdiffusion/autodoping and increasing perfection of the epilayer with increasing temperature. The structural, chemical, optical, and electrical properties of the heterostructures are characterized by x-ray rocking curve measurement, scanning electron microscopy (SEM), electron beam induced current (EBIC), cross-sectional transmission electron microscopy (X-TEM), Raman spectroscopy, secondary ion mass spectrometry (SIMS), and steady-state and time-resolved photoluminescence (PL). Based on the results of this work the optimum growth temperature is 720^circC. The second part of the thesis describes the growth of GaN and GaP layers on silicon and sapphire substrates and the homoepitaxy of GaP by remote PECVD. I have designed and built an ultra high vacuum (UHV) deposition system which includes: the gas supply system, the pumping system, the deposition chamber, the load-lock chamber, and the waste disposal system. The work on the deposition of GaN on Si and sapphire focuses onto the understanding of the growth kinetics. In addition, Auger electron spectroscopy (AES) for surface analysis, x-ray diffraction methods and microscopic analyses using SEM and TEM for structural characterization, infrared (IR) and ultraviolet (UV) absorption measurements for optical characterization, and electrical characterization results on the GaN films are presented. In the deposition GaP thin films by remote PECVD, trimethylgallium and in-situ generated phosphine precursors are employed as source gases which permits homo- and heteroepitaxial growth as substrate temperature of 590-620^ circC. Also, the growth kinetics of gallium phosphide is discussed. As in the case of GaN, the surface, structural, chemical, optical, and electrical properties are characterized and the results are discussed.

  7. Inductively and capacitively coupled plasmas at interface: A comparative study towards highly efficient amorphous-crystalline Si solar cells

    NASA Astrophysics Data System (ADS)

    Guo, Yingnan; Ong, Thiam Min Brian; Levchenko, I.; Xu, Shuyan

    2018-01-01

    A comparative study on the application of two quite different plasma-based techniques to the preparation of amorphous/crystalline silicon (a-Si:H/c-Si) interfaces for solar cells is presented. The interfaces were fabricated and processed by hydrogen plasma treatment using the conventional plasma-enhanced chemical vacuum deposition (PECVD) and inductively coupled plasma chemical vapour deposition (ICP-CVD) methods The influence of processing temperature, radio-frequency power, treatment duration and other parameters on interface properties and degree of surface passivation were studied. It was found that passivation could be improved by post-deposition treatment using both ICP-CVD and PECVD, but PECVD treatment is more efficient for the improvement on passivation quality, whereas the minority carrier lifetime increased from 1.65 × 10-4 to 2.25 × 10-4 and 3.35 × 10-4 s after the hydrogen plasma treatment by ICP-CVD and PECVD, respectively. In addition to the improvement of carrier lifetimes at low temperatures, low RF powers and short processing times, both techniques are efficient in band gap adjustment at sophisticated interfaces.

  8. Surface roughness analysis of SiO2 for PECVD, PVD and IBD on different substrates

    NASA Astrophysics Data System (ADS)

    Amirzada, Muhammad Rizwan; Tatzel, Andreas; Viereck, Volker; Hillmer, Hartmut

    2016-02-01

    This study compares surface roughness of SiO2 thin layers which are deposited by three different processes (plasma-enhanced chemical vapor deposition, physical vapor deposition and ion beam deposition) on three different substrates (glass, Si and polyethylene naphthalate). Plasma-enhanced chemical vapor deposition (PECVD) processes using a wide range of deposition temperatures from 80 to 300 °C have been applied and compared. It was observed that the nature of the substrate does not influence the surface roughness of the grown layers very much. It is also perceived that the value of the surface roughness keeps on increasing as the deposition temperature of the PECVD process increases. This is due to the increase in the surface diffusion length with the rise in substrate temperature. The layers which have been deposited on Si wafer by ion beam deposition (IBD) process are found to be smoother as compared to the other two techniques. The layers which have been deposited on the glass substrates using PECVD reveal the highest surface roughness values in comparison with the other substrate materials and techniques. Different existing models describing the dynamics of clusters on surfaces are compared and discussed.

  9. Effect of dual-dielectric hydrogen-diffusion barrier layers on the performance of low-temperature processed transparent InGaZnO thin-film transistors

    NASA Astrophysics Data System (ADS)

    Tari, Alireza; Wong, William S.

    2018-02-01

    Dual-dielectric SiOx/SiNx thin-film layers were used as back-channel and gate-dielectric barrier layers for bottom-gate InGaZnO (IGZO) thin-film transistors (TFTs). The concentration profiles of hydrogen, indium, gallium, and zinc oxide were analyzed using secondary-ion mass spectroscopy characterization. By implementing an effective H-diffusion barrier, the hydrogen concentration and the creation of H-induced oxygen deficiency (H-Vo complex) defects during the processing of passivated flexible IGZO TFTs were minimized. A bilayer back-channel passivation layer, consisting of electron-beam deposited SiOx on plasma-enhanced chemical vapor-deposition (PECVD) SiNx films, effectively protected the TFT active region from plasma damage and minimized changes in the chemical composition of the semiconductor layer. A dual-dielectric PECVD SiOx/PECVD SiNx gate-dielectric, using SiOx as a barrier layer, also effectively prevented out-diffusion of hydrogen atoms from the PECVD SiNx-gate dielectric to the IGZO channel layer during the device fabrication.

  10. Deposition of single and layered amorphous fluorocarbon films by C8F18 PECVD

    NASA Astrophysics Data System (ADS)

    Yamauchi, Tatsuya; Mizuno, Kouichiro; Sugawara, Hirotake

    2008-10-01

    Amorphous fluorocarbon films were deposited by plasma-enhanced chemical vapor deposition (PECVD) using C8F18 in closed system at C8F18 pressures 0.1--0.3 Torr, deposition times 1--30 min and plasma powers 20--200 W@. The layered films were composed by repeated PECVD processes. We compared `two-layered' and `intermittently deposited' films, which were made by the PECVD, respectively, with and without renewal of the gas after the deposition of the first layer. The interlayer boundary was observed in the layered films, and that of the intermittently deposited films showed a tendency to be clearer when the deposition time until the interruption of the PECVD was shorter. The film thickness increased linearly in the beginning of the PECVD and it turned down after 10--15 min, that was similar between the single and intermittently deposited films. It was considered that large precursors made at a low decomposition degree of C8F18 contributed to the film deposition in the early phase and that the downturn was due to the development of the C8F18 decomposition. This explanation on the deposition mechanism agrees qualitatively with our experimental data of pressure change and optical emission spectra during the deposition. This work is supported by Grant-in-Aid from Japan Society for the Promotion of Science.

  11. Plasma enhanced chemical vapour deposition of silica onto Ti: Analysis of surface chemistry, morphology and functional hydroxyl groups

    PubMed Central

    Szili, Endre J.; Kumar, Sunil; Smart, Roger St. C.; Lowe, Rachel; Saiz, Eduardo; Voelcker, Nicolas H.

    2009-01-01

    Previously, we have developed and characterised a procedure for the deposition of thin silica films by a plasma enhanced chemical vapour deposition (PECVD) procedure using tetraethoxysilane (TEOS) as the main precursor. We have used the silica coatings for improving the corrosion resistance of metals and for enhancing the bioactivity of biomedical metallic implants. Recently, we have been fine-tuning the PECVD method for producing high quality and reproducible PECVD-silica (PECVD-Si) coatings on metals, primarily for biomaterial applications. In order to understand the interaction of the PECVD-Si coatings with biological species (such as proteins and cells), it is important to first analyse the properties of the silica films deposited using the optimised parameters. Therefore, this current investigation was carried out to analyse the characteristic features of PECVD-Si deposited on Ti substrates (PECVD-Si-Ti). We determined that the PECVD-Si coatings on Ti were conformal to the substrate surface, strongly adhered to the underlying substrate and were resistant to delamination. The PECVD-Si surface was composed of stoichiometric SiO2, showed a low carbon content (below 10 at.%) and was very hydrophilic (contact angle <10°). Finally, we also showed that the PECVD-Si coatings contain functional hydroxyl groups. PMID:19809536

  12. Detection Of Gas-Phase Polymerization in SiH4 And GeH4

    NASA Technical Reports Server (NTRS)

    Shing, Yuh-Han; Perry, Joseph W.; Allevato, Camillo E.

    1990-01-01

    Inelastic scattering of laser light found to indicate onset of gas-phase polymerization in plasma-enhanced chemical-vapor deposition (PECVD) of photoconductive amorphous hydrogenated silicon/germanium alloy (a-SiGe:H) film. In PECVD process, film deposited from radio-frequency glow-discharge plasma of silane (SiH4) and germane (GeH4) diluted with hydrogen. Gas-phase polymerization undesirable because it causes formation of particulates and defective films.

  13. Thermionic Properties of Carbon Based Nanomaterials Produced by Microhollow Cathode PECVD

    NASA Technical Reports Server (NTRS)

    Haase, John R.; Wolinksy, Jason J.; Bailey, Paul S.; George, Jeffrey A.; Go, David B.

    2015-01-01

    Thermionic emission is the process in which materials at sufficiently high temperature spontaneously emit electrons. This process occurs when electrons in a material gain sufficient thermal energy from heating to overcome the material's potential barrier, referred to as the work function. For most bulk materials very high temperatures (greater than 1500 K) are needed to produce appreciable emission. Carbon-based nanomaterials have shown significant promise as emission materials because of their low work functions, nanoscale geometry, and negative electron affinity. One method of producing these materials is through the process known as microhollow cathode PECVD. In a microhollow cathode plasma, high energy electrons oscillate at very high energies through the Pendel effect. These high energy electrons create numerous radical species and the technique has been shown to be an effective method of growing carbon based nanomaterials. In this work, we explore the thermionic emission properties of carbon based nanomaterials produced by microhollow cathode PECVD under a variety of synthesis conditions. Initial studies demonstrate measureable current at low temperatures (approximately 800 K) and work functions (approximately 3.3 eV) for these materials.

  14. Microbridge testing of plasma-enhanced chemical-vapor deposited silicon oxide films on silicon wafers

    NASA Astrophysics Data System (ADS)

    Cao, Zhiqiang; Zhang, Tong-Yi; Zhang, Xin

    2005-05-01

    Plasma-enhanced chemical-vapor deposited (PECVD) silane-based oxides (SiOx) have been widely used in both microelectronics and microelectromechanical systems (MEMS) to form electrical and/or mechanical components. In this paper, a nanoindentation-based microbridge testing method is developed to measure both the residual stresses and Young's modulus of PECVD SiOx films on silicon wafers. Theoretically, we considered both the substrate deformation and residual stress in the thin film and derived a closed formula of deflection versus load. The formula fitted the experimental curves almost perfectly, from which the residual stresses and Young's modulus of the film were determined. Experimentally, freestanding microbridges made of PECVD SiOx films were fabricated using the silicon undercut bulk micromachining technique. Some microbridges were subjected to rapid thermal annealing (RTA) at a temperature of 400 °C, 600 °C, or 800 °C to simulate the thermal process in the device fabrication. The results showed that the as-deposited PECVD SiOx films had a residual stress of -155±17MPa and a Young's modulus of 74.8±3.3GPa. After the RTA, Young's modulus remained relatively unchanged at around 75 GPa, however, significant residual stress hysteresis was found in all the films. A microstructure-based mechanism was then applied to explain the experimental results of the residual stress changes in the PECVD SiOx films after the thermal annealing.

  15. Structurally controlled deposition of silicon onto nanowires

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Wang, Weijie; Liu, Zuqin; Han, Song

    Provided herein are nanostructures for lithium ion battery electrodes and methods of fabrication. In some embodiments, a nanostructure template coated with a silicon coating is provided. The silicon coating may include a non-conformal, more porous layer and a conformal, denser layer on the non-conformal, more porous layer. In some embodiments, two different deposition processes, e.g., a PECVD layer to deposit the non-conformal layer and a thermal CVD process to deposit the conformal layer, are used. Anodes including the nanostructures have longer cycle lifetimes than anodes made using either a PECVD or thermal CVD method alone.

  16. Process for forming planarized films

    DOEpatents

    Pang, Stella W.; Horn, Mark W.

    1991-01-01

    A planarization process and apparatus which employs plasma-enhanced chemical vapor deposition (PECVD) to form plarnarization films of dielectric or conductive carbonaceous material on step-like substrates.

  17. Uncooled Cantilever Microbolometer Focal Plane Arrays with mK Temperature Resolution: Engineering Mechanics for the Next Generation

    DTIC Science & Technology

    2009-11-25

    34Nanoindentation Stress-Strain Curves of Plasma Enhanced Chemical Vapor Deposited Silicon Oxide Thin Films," Thin Solid Films, 516 (8) (2008) 1941-1951. 9. S...1604. 5. Z. Cao* and X. Zhang, "Measurement of Stress-Strain Curves of PECVD Silicon Oxide Thin Films by Means of Nanoindentation," in Processing...Microsystems (Transducers 󈧋), Lyon, France, June 10-14, 2007. 9. Z. Cao* and X. Zhang, “Measurement of Stress-strain Curves of PECVD Silicon Oxide

  18. Study of supersonic plasma technology jets

    NASA Astrophysics Data System (ADS)

    Selezneva, Svetlana; Gravelle, Denis; Boulos, Maher; van de Sanden, Richard; Schram, Dc

    2001-10-01

    Recently some new techniques using remote thermal plasma for thin film deposition and plasma chemistry processes were developed. These techniques include PECVD of diamonds, diamond-like and polymer films; a-C:H and a-Si:H films. The latter are of especial interest because of their applications for solar cell production industry. In remote plasma deposition, thermal plasma is formed by means of one of traditional plasma sources. The chamber pressure is reduced with the help of continuous pumping. In that way the flow is accelerated up to the supersonic speed. The plasma expansion is controlled using a specific torch nozzle design. To optimize the deposition process detailed knowledge about the gas dynamic structure of the jet and chemical kinetics mechanisms is required. In the paper, we show how the flow pattern and the character of the deviations from local thermodynamic equilibrium differs in plasmas generated by different plasma sources, such as induction plasma torch, traditional direct current arc and cascaded arc. We study the effects of the chamber pressure, nozzle design and carrier gas on the resulting plasma properties. The analysis is performed by means of numerical modeling using commercially available FLUENT program with incorporated user-defined subroutines for two-temperature model. The results of continuum mechanics approach are compared with that of the kinetic Monte Carlo method and with the experimental data.

  19. Design and fabrication of asymmetric nanopores using pulsed PECVD

    NASA Astrophysics Data System (ADS)

    Kelkar, Sanket S.

    Manipulating matter at nanometric length scales is important for many electronic, chemical and biological applications. Structures such as nanopores demonstrate a phenomenon known as hindered transport which can be exploited in analytical applications such as DNA sequencing, ionic transistors, and molecular sieving. Precisely controlling the size, geometry and surface characteristics of the nanopores is important for realizing these applications. In this work, we employ relatively large template structures (˜ 100 nm) produced by track-etching or electron beam lithography. The pore size is then reduced to the desired level by deposition of material using pulsed plasma enhanced chemical vapor deposition (PECVD). Pulsed PECVD has been developed as a high throughput alternative to atomic layer deposition (ALD) to deliver self-limiting growth of thin films. The goal of this thesis is to extend the application of pulsed PECVD to fabricate asymmetric nanopores. In contrast to ALD, pulsed PECVD does not result in perfectly conformal deposition profiles, and predicting the final nanostructure is more complicated. A two dimensional feature scale model was developed to predict film profile evolution. The model was built in COMSOL, and is based on a diffusion reaction framework with a spatially varying Knudsen diffusion coefficient to account for the molecular transport inside the features. A scaling analysis was used to account for ALD exposure limitations that commonly occur when coating these extremely high aspect ratio features. The model was verified by cross-section microscopy of deposition profiles on patterned cylinders and trenches. The model shows that it is possible to obtain unique nanopore morphologies in pulsed PECVD that are distinct from either steady state deposition processes such as physical vapor deposition (PVD) or conventional ALD. Polymeric track etched (TE) membrane supports with a nominal size of 100 nm were employed as model template structures to demonstrate the capability of pulsed PECVD for precise pore size reduction of model supports. The efficacy of pulsed PECVD for nanopore fabrication was compared to both ALD and PVD. Flux and solute rejection measurements demonstrate that the pulsed PECVD-modified TE membranes exhibit higher selectivity without compromising on the flux due to their asymmetric structure. For example, the TiO2 modified supports were demonstrated to deliver high retention (˜ 75%) of bovine serum albumin (BSA) protein while maintaining 70% of their initial pure water flux. PVD also forms asymmetric membranes that enable high flux. But due to morphological instabilities, reproducibility and control were poor in the PVD-modified membranes, and it was not possible to optimize the flux and the selectivity of the membranes simultaneously. Excellent agreement between measured flux and model predictions based on feature scale simulations provided further validation of the tool's fidelity. Since surface energetics can often dominate hindered transport, the kinetics and thermodynamics of the octadecyltrichlorosilane (OTS) attachment was investigated in-depth as an approach to convert hydrophilic metal oxides into hydrophobic surfaces. It was shown that a simple ozone treatment was a satisfactory alternative to hazardous acids to create the highly hydroxylated surface required for OTS attachment, and that using heptane as the solvent enabled the process to be conducted under ambient conditions without the need of a glovebox. The kinetics of OTS self-assembled monolayer (SAM) formation and the saturation contact angle (˜100°) on alumina are comparable to what has been observed for OTS attachment on silicon. The OTS SAMs also demonstrated excellent thermal stability, and the modified surface showed a critical surface tension of 21.4 dyne/cm.

  20. Fabrication of Single, Vertically Aligned Carbon Nanotubes in 3D Nanoscale Architectures

    NASA Technical Reports Server (NTRS)

    Kaul, Anupama B.; Megerian, Krikor G.; Von Allmen, Paul A.; Baron, Richard L.

    2010-01-01

    Plasma-enhanced chemical vapor deposition (PECVD) and high-throughput manufacturing techniques for integrating single, aligned carbon nanotubes (CNTs) into novel 3D nanoscale architectures have been developed. First, the PECVD growth technique ensures excellent alignment of the tubes, since the tubes align in the direction of the electric field in the plasma as they are growing. Second, the tubes generated with this technique are all metallic, so their chirality is predetermined, which is important for electronic applications. Third, a wafer-scale manufacturing process was developed that is high-throughput and low-cost, and yet enables the integration of just single, aligned tubes with nanoscale 3D architectures with unprecedented placement accuracy and does not rely on e-beam lithography. Such techniques should lend themselves to the integration of PECVD grown tubes for applications ranging from interconnects, nanoelectromechanical systems (NEMS), sensors, bioprobes, or other 3D electronic devices. Chemically amplified polyhydroxystyrene-resin-based deep UV resists were used in conjunction with excimer laser-based (lambda = 248 nm) step-and-repeat lithography to form Ni catalyst dots = 300 nm in diameter that nucleated single, vertically aligned tubes with high yield using dc PECVD growth. This is the first time such chemically amplified resists have been used, resulting in the nucleation of single, vertically aligned tubes. In addition, novel 3D nanoscale architectures have been created using topdown techniques that integrate single, vertically aligned tubes. These were enabled by implementing techniques that use deep-UV chemically amplified resists for small-feature-size resolution; optical lithography units that allow unprecedented control over layer-to-layer registration; and ICP (inductively coupled plasma) etching techniques that result in near-vertical, high-aspect-ratio, 3D nanoscale architectures, in conjunction with the use of materials that are structurally and chemically compatible with the high-temperature synthesis of the PECVD-grown tubes. The techniques offer a wafer-scale process solution for integrating single PECVD-grown nanotubes into novel architectures that should accelerate their integration in 3D electronics in general. NASA can directly benefit from this technology for its extreme-environment planetary missions. Current Si transistors are inherently more susceptible to high radiation, and do not tolerate extremes in temperature. These novel 3D nanoscale architectures can form the basis for NEMS switches that are inherently less susceptible to radiation or to thermal extremes.

  1. Thermally-Resilient, Broadband Optical Absorber from UV-to-IR Derived from Carbon Nanostructures and Method of Making the Same

    NASA Technical Reports Server (NTRS)

    Kaul, Anupama B. (Inventor); Coles, James B. (Inventor)

    2015-01-01

    A monolithic optical absorber and methods of making same. The monolithic optical absorber uses an array of mutually aligned carbon nanotubes that are grown using a PECVD growth process and a structure that includes a conductive substrate, a refractory template layer and a nucleation layer. Monolithic optical absorbers made according to the described structure and method exhibit high absorptivity, high site densities (greater than 10.sup.9 nanotubes/cm.sup.2), very low reflectivity (below 1%), and high thermal stability in air (up to at least 400.degree. C.). The PECVD process allows the application of such absorbers in a wide variety of end uses.

  2. Exploration of plasma-enhanced chemical vapor deposition as a method for thin-film fabrication with biological applications.

    PubMed

    Vasudev, Milana C; Anderson, Kyle D; Bunning, Timothy J; Tsukruk, Vladimir V; Naik, Rajesh R

    2013-05-22

    Chemical vapor deposition (CVD) has been used historically for the fabrication of thin films composed of inorganic materials. But the advent of specialized techniques such as plasma-enhanced chemical vapor deposition (PECVD) has extended this deposition technique to various monomers. More specifically, the deposition of polymers of responsive materials, biocompatible polymers, and biomaterials has made PECVD attractive for the integration of biotic and abiotic systems. This review focuses on the mechanisms of thin-film growth using low-pressure PECVD and current applications of classic PECVD thin films of organic and inorganic materials in biological environments. The last part of the review explores the novel application of low-pressure PECVD in the deposition of biological materials.

  3. Silicon Cluster Tool | Photovoltaic Research | NREL

    Science.gov Websites

    Material Deposition/Device Fabrication Very-high-frequency plasma-enhanced chemical vapor deposition (VHF PECVD) for microcrystalline silicon (µc-Si:H) Combinatorial plasma-enhanced chemical vapor deposition (Combi-PECVD) for p-type a-Si:H Plasma-enhanced chemical vapor deposition (PECVD) for n-type a-Si:H

  4. Structural and optical properties of arsenic sulfide films synthesized by a novel PECVD-based approach

    NASA Astrophysics Data System (ADS)

    Mochalov, Leonid; Kudryashov, Mikhail; Logunov, Aleksandr; Zelentsov, Sergey; Nezhdanov, Aleksey; Mashin, Alexandr; Gogova, Daniela; Chidichimo, Giuseppe; De Filpo, Giovanni

    2017-11-01

    A new plasma-enhanced chemical vapor deposition-based (PECVD) approach for synthesizing of As-S films, with As content in the range 60-40 at.%, is demonstrated. The process has been carried out in a low-temperature Ar-plasma, employing for the first time volatile As and S as precursors. Utilization of inorganic elemental precursors, in contrast to the typically used in CVD metal-organic compounds or volatile hydrides/halides of Va- and VIa-group-elements, gives the possibility to reach the highest quality and purity of the As-S ≿halcogenide films. Quantum-chemical calculations have been performed to gain insight into the PECVD As-S chalcogenide films structure and the mechanism of its formation in the plasma discharge. An additional vibrational band near 650 cm-1 corresponding to cycled 2-dimensional units is observed by Raman spectroscopy. The process developed is cost-efficient one due to the very precise control and the long-term stability of the plasma parameters and it possesses a high potential for large-area applications such as fabrication of miniature integrated optical elements and 2D/3D printing of optical devices.

  5. Optimization of silicon oxynitrides by plasma-enhanced chemical vapor deposition for an interferometric biosensor

    NASA Astrophysics Data System (ADS)

    Choo, Sung Joong; Lee, Byung-Chul; Lee, Sang-Myung; Park, Jung Ho; Shin, Hyun-Joon

    2009-09-01

    In this paper, silicon oxynitride layers deposited with different plasma-enhanced chemical vapor deposition (PECVD) conditions were fabricated and optimized, in order to make an interferometric sensor for detecting biochemical reactions. For the optimization of PECVD silicon oxynitride layers, the influence of the N2O/SiH4 gas flow ratio was investigated. RF power in the PEVCD process was also adjusted under the optimized N2O/SiH4 gas flow ratio. The optimized silicon oxynitride layer was deposited with 15 W in chamber under 25/150 sccm of N2O/SiH4 gas flow rates. The clad layer was deposited with 20 W in chamber under 400/150 sccm of N2O/SiH4 gas flow condition. An integrated Mach-Zehnder interferometric biosensor based on optical waveguide technology was fabricated under the optimized PECVD conditions. The adsorption reaction between bovine serum albumin (BSA) and the silicon oxynitride surface was performed and verified with this device.

  6. High-Throughput Top-Down and Bottom-Up Processes for Forming Single-Nanotube Based Architectures for 3D Electronics

    NASA Technical Reports Server (NTRS)

    Kaul, Anupama B.; Megerian, Krikor G.; von Allmen, Paul; Kowalczyk, Robert; Baron, Richard

    2009-01-01

    We have developed manufacturable approaches to form single, vertically aligned carbon nanotubes, where the tubes are centered precisely, and placed within a few hundred nm of 1-1.5 micron deep trenches. These wafer-scale approaches were enabled by chemically amplified resists and inductively coupled Cryo-etchers for forming the 3D nanoscale architectures. The tube growth was performed using dc plasma-enhanced chemical vapor deposition (PECVD), and the materials used for the pre-fabricated 3D architectures were chemically and structurally compatible with the high temperature (700 C) PECVD synthesis of our tubes, in an ammonia and acetylene ambient. Tube characteristics were also engineered to some extent, by adjusting growth parameters, such as Ni catalyst thickness, pressure and plasma power during growth. Such scalable, high throughput top-down fabrication techniques, combined with bottom-up tube synthesis, should accelerate the development of PECVD tubes for applications such as interconnects, nano-electromechanical (NEMS), sensors or 3D electronics in general.

  7. Photonic band gap and defects modes in inorganic/organic photonic crystal based on Si and HMDSO layers deposited by sputtering and PECVD

    NASA Astrophysics Data System (ADS)

    Amri, R.; Sahel, S.; Gamra, D.; Lejeune, M.; Clin, M.; Zellama, K.; Bouchriha, H.

    2018-02-01

    Hybrid inorganic/organic one dimensional photonic crystal based on alternating layers of Si/HMDSO is elaborated. The inorganic silicon is deposited by radiofrequency magnetron sputtering and the organic HMDSO is deposited by PECVD technique. As the Si refractive index is n = 3.4, and the refractive index of HMDSO layer depend on the deposition conditions, to get a photonic crystal with high and low refractive index presenting a good contrast, we have varied the radiofrequency power of PECVD process to obtain HMDSO layer with low refractive index (n = 1.45). Photonic band gap of this hybrid structure is obtained from the transmission and reflection spectra and appears after 9 alternative layers of Si/HMDSO. The introduction of defects in our photonic crystal leads to the emergence of localized modes within the photonic band gap. Our results are interpreted by using a theoretical model based on transfer matrix.

  8. Simulation and experimental verification of silicon dioxide deposition by PECVD

    NASA Astrophysics Data System (ADS)

    Xu, Qing; Li, Yu-Xing; Li, Xiao-Ning; Wang, Jia-Bin; Yang, Fan; Yang, Yi; Ren, Tian-Ling

    2017-02-01

    Deposition of silicon dioxide in high-density plasma is an important process in integrated circuit manufacturing. A software named CFD-ACE was used to simulate the mechanism of plasma in the chamber of plasma enhanced chemical vapor deposition (PECVD) system, and the evolution of the feature profile was simulated based on CFD-TOPO. Simulation and experiment of silicon dioxide that deposited in SiH4/N2O mixture by PECVD system was researched. The particle density, energy and angular distribution in the chamber were simulated and discussed. We also studied how the depth/width ratio affected the step coverage of the trench and analyzed the deposition rate of silicon dioxide on the feature scale. X-ray photoelectron spectroscopy (XPS) was used to analyze the elemental composition of thin films. Images of the feature profiles were taken by scanning electron microscope (SEM). The simulation results were in good agreement with experimental, which could guide the semiconductor device manufacture.

  9. Microcrystalline silicon thin films deposited by matrix-distributed electron cyclotron resonance plasma enhanced chemical vapor deposition using an SiF4 /H2 chemistry

    NASA Astrophysics Data System (ADS)

    Wang, Junkang; Bulkin, Pavel; Florea, Ileana; Maurice, Jean-Luc; Johnson, Erik

    2016-07-01

    For the growth of hydrogenated microcrystalline silicon (μc-Si:H) thin films by low temperature plasma-enhanced chemical vapor deposition (PECVD), silicon tetrafluoride (SiF4) has recently attracted interest as a precursor due to the resilient optoelectronic performance of the resulting material and devices. In this work, μc-Si:H films are deposited at high rates (7 Å s-1) from a SiF4 and hydrogen (H2) gas mixture by matrix-distributed electron cyclotron resonance PECVD (MDECR-PECVD). Increased substrate temperature and moderate ion bombardment energy (IBE) are demonstrated to be of vital importance to achieve high quality μc-Si:H films under such low process pressure and high plasma density conditions, presumably due to thermally-induced and ion-induced enhancement of surface species migration. Two well-defined IBE thresholds at 12 eV and 43 eV, corresponding respectively to SiF+ ion-induced surface and bulk atomic displacement, are found to be determinant to the final film properties, namely the surface roughness, feature size and crystalline content. Moreover, a study of the growth dynamics shows that the primary challenge to producing highly crystallized μc-Si:H films by MDECR-PECVD appears to be the nucleation step. By employing a two-step method to first prepare a highly crystallized seed layer, μc-Si:H films lacking any amorphous incubation layer have been obtained. A crystalline volume fraction of 68% is achieved with a substrate temperature as low as 120 °C, which is of great interest to broaden the process window for solar cell applications.

  10. Synthesis and electrochemical properties of Ti-doped DLC films by a hybrid PVD/PECVD process

    NASA Astrophysics Data System (ADS)

    Jo, Yeong Ju; Zhang, Teng Fei; Son, Myoung Jun; Kim, Kwang Ho

    2018-03-01

    Low electrical conductivity and poor adhesion to metallic substrates are the main drawbacks of diamond-like carbon (DLC) films when used in electrode applications. In this study, Ti-doped DLC films with various Ti contents were synthesized on metal Ti substrates by a hybrid PVD/PECVD process, where PECVD was used for deposition of DLC films and PVD was used for Ti doping. The effects of the Ti doping ratio on the microstructure, adhesion strength, and electrical and electrochemical properties of the DLC films were systematically investigated. An increase in the Ti content led to increased surface roughness and a higher sp2/sp3 ratio of the Ti-DLC films. Ti atoms existed as amorphous-phase Ti carbide when the Ti doping ratio was less than 2.8 at.%, while the nanocrystalline TiC phase was formed in DLC films when the Ti doping ratio was exceeded 4.0 at.%. The adhesion strength, electrical resistivity, electrochemical activity and reversibility of the DLC films were greatly improved by Ti doping. The influence of Ti doping ratio on the electrical and electrochemical properties of the DLC films were also investigated and the best performance was obtained at a Ti content of 2.8 at.%.

  11. Growth kinetics and characterizations of gallium nitride thin films by remote PECVD

    NASA Technical Reports Server (NTRS)

    Choi, S. W.; Bachmann, K. J.; Lucovsky, G.

    1993-01-01

    Thin films of GaN have been deposited at relatively low growth temperatures by remote plasma-enhanced chemical-vapor deposition (RPECVD), using a plasma excited NH3, and trimethylgallium (TMG), injected downstream from the plasma. The activation energy for GaN growth has been tentatively assigned to the dissociation of NH groups as the primary N-atom precursors in the surface reaction with adsorbed TMG, or TMG fragments. At high He flow rates, an abrupt increase in the growth rate is observed and corresponds to a change in the reaction mechanism attributed to the formation of atomic N. XRD reveals an increased tendency to ordered growth in the (0001) direction with increasing growth temperature, He flow rate, and RF plasma power. IR spectra show the fundamental lattice mode of GaN at 530 cm without evidence for vibrational modes of hydrocarbon groups.

  12. Methods for passivating silicon devices at low temperature to achieve low interface state density and low recombination velocity while preserving carrier lifetime

    DOEpatents

    Chen, Zhizhang; Rohatgi, Ajeet

    1995-01-01

    A new process has been developed to achieve a very low SiO.sub.x /Si interface state density D.sub.it, low recombination velocity S (<2 cm/s), and high effective carrier lifetime T.sub.eff (>5 ms) for oxides deposited on silicon substrates at low temperature. The technique involves direct plasma-enhanced chemical vapor deposition (PECVD), with appropriate growth conditions, followed by a photo-assisted rapid thermal annealing (RTA) process. Approximately 500-A-thick SiO.sub.x layers are deposited on Si by PECVD at 250.degree. C. with 0.02 W/cm.sup.-2 rf power, then covered with SiN or an evaporated thin aluminum layer, and subjected to a photo-assisted anneal in forming gas ambient at 350.degree. C., resulting in an interface state density D.sub.it in the range of about 1-4.times.10.sup.10 cm.sup.-2 eV.sup.-1, which sets a record for the lowest interface state density D.sub.it for PECVD oxides fabricated to date. Detailed analysis shows that the PECVD deposition conditions, photo-assisted anneal, forming gas ambient, and the presence of an aluminum layer on top of the oxides during the anneal, all contributed to this low value of interface state density D.sub.it. Detailed metal-oxide semiconductor analysis and model calculations show that such a low recombination velocity S is the result of moderately high positive oxide charge (5.times.10.sup.11 -1.times.10.sup.12 cm.sup.-2) and relatively low midgap interface state density (1.times.10.sup.10 -4.times.10.sup.10 cm.sup.-2 eV.sup.-1). Photo-assisted anneal was found to be superior to furnace annealing, and a forming gas ambient was better than a nitrogen ambient for achieving a very low surface recombination velocity S.

  13. Patterned carbon nanotubes fabricated by the combination of microcontact printing and diblock copolymer micelles.

    PubMed

    Xu, Peng; Ji, Xin; Qi, Junlei; Yang, Hongmin; Zheng, Weitao; Abetz, Volker; Jiang, Shimei; Shen, Jiacong

    2010-01-01

    A convenient approach to synthesize patterned carbon nanotubes (CNTs) of three morphologies on printed substrates by combination of microcontact printing (microCP) and a plasma-enhanced chemical vapor deposition (PECVD) process is presented. Micelles of polystyrene-block-poly-(2-vinylpyridine) (PS-b-P2VP) in toluene were used as nanoreactors to fabricate FeCl3 in the core domains, and the complex solution was used as an ink to print films with polydimethylsiloxane (PDMS) stamps, different morphologies (porous, dots and stripes patterns) of the FeCl3-loaded micellar films were left onto silicon substrates after printed. After removing the polymer by thermal decomposition, the left iron oxide cluster arrays on the substrate were used as catalysts for the growth of CNTs by the process of PECVD, where the CNTs uniformly distributed on the substrates according to the morphologies of patterned catalysts arrays.

  14. High density gold nanoparticles immobilized on surface via plasma deposited APTES film for decomposing organic compounds in microchannels

    NASA Astrophysics Data System (ADS)

    Rao, Xi; Guyon, Cédric; Ognier, Stephanie; Da Silva, Bradley; Chu, Chenglin; Tatoulian, Michaël; Hassan, Ali Abou

    2018-05-01

    Immobilization of colloidal particles (e.g. gold nanoparticles (AuNps)) on the inner surface of micro-/nano- channels has received a great interest for catalysis. A novel catalytic ozonation setup using a gold-immobilized microchannel reactor was developed in this work. To anchor AuNps, (3-aminopropyl) triethoxysilane (APTES) with functional amine groups was deposited using plasma enhanced chemical vapor deposition (PECVD) process. The results clearly evidenced that PECVD processing exhibited relatively high efficiency for grafting amine groups and further immobilizing AuNPs. The catalytic activity of gold immobilized microchannel was evaluated by pyruvic acid ozonation. The decomposition rate calculated from High Performance Liquid Chromatography (HPLC) indicated a much better catalytic performance of gold in microchannel than that in batch. The results confirmed immobilizing gold nanoparticles on plasma deposited APTES for preparing catalytic microreactors is promising for the wastewater treatment in the future.

  15. Influence of residual stress on the adhesion and surface morphology of PECVD-coated polypropylene

    NASA Astrophysics Data System (ADS)

    Jaritz, Montgomery; Hopmann, Christian; Behm, Henrik; Kirchheim, Dennis; Wilski, Stefan; Grochla, Dario; Banko, Lars; Ludwig, Alfred; Böke, Marc; Winter, Jörg; Bahre, Hendrik; Dahlmann, Rainer

    2017-11-01

    The properties of plasma-enhanced chemical vapour deposition (PECVD) coatings on polymer materials depend to some extent on the surface and material properties of the substrate. Here, isotactic polypropylene (PP) substrates are coated with silicon oxide (SiO x ) films. Plasmas for the deposition of SiO x are energetic and oxidative due to the high amount of oxygen in the gas mixture. Residual stress measurements using single Si cantilever stress sensors showed that these coatings contain high compressive stress. To investigate the influence of the plasma and the coatings, residual stress, silicon organic (SiOCH) coatings with different thicknesses between the PP and the SiO x coating are used as a means to protect the substrate from the oxidative SiO x coating process. Pull-off tests are performed to analyse differences in the adhesion of these coating systems. It could be shown that the adhesion of the PECVD coatings on PP depends on the coatings’ residual stress. In a PP/SiOCH/SiO x -multilayer system the residual stress can be significantly reduced by increasing the thickness of the SiOCH coating, resulting in enhanced adhesion.

  16. Tuning Wettability and Adhesion of Structured Surfaces

    NASA Astrophysics Data System (ADS)

    Badge, Ila

    Structured surfaces with feature size ranging from a few micrometers down to nanometers are of great interest in the applications such as design of anti-wetting surfaces, tissue engineering, microfluidics, filtration, microelectronic devices, anti-reflective coatings and reversible adhesives. A specific surface property demands particular roughness geometry along with suitable surface chemistry. Plasma Enhanced Chemical Vapor Deposition (PECVD) is a technique that offers control over surface chemistry without significantly affecting the roughness and thus, provides a flexibility to alter surface chemistry selectively for a given structured surface. In this study, we have used PECVD to fine tune wetting and adhesion properties. The research presented focuses on material design aspects as well as the fundamental understanding of wetting and adhesion phenomena of structured surfaces. In order to study the effect of surface roughness and surface chemistry on the surface wettability independently, we developed a model surface by combination of colloidal lithography and PECVD. A systematically controlled hierarchical roughness using spherical colloidal particles and surface chemistry allowed for quantitative prediction of contact angles corresponding to metastable and stable wetting states. A well-defined roughness and chemical composition of the surface enabled establishing a correlation between theory predictions and experimental measurements. We developed an extremely robust superhydrophobic surface based on Carbon-Nanotubes (CNT) mats. The surface of CNTs forming a nano-porous mesh was modified using PECVD to deposit a layer of hydrophobic coating (PCNT). The PCNT surface thus formed is superhydrophobic with almost zero contact angle hysteresis. We demonstrated that the PCNT surface is not wetted under steam condensation even after prolonged exposure and also continues to retain its superhydrophobicity after multiple frosting-defrosting cycles. The anti-wetting behavior of PCNT surface is consistent with our model predictions, derived based on thermodynamic theory of wetting. The surface of gecko feet is a very unique natural structured surface. The hierarchical surface structure of a Gecko toe pad is responsible for its reversible adhesive properties and superhydrophobicity. van der Waals interactions is known to be the key mechanism behind Gecko adhesion. However, we found that the wettability, thus the surface chemistry plays a significant role in Gecko adhesion mechanism, especially in the case of underwater adhesion. We used PECVD process to deposit a layer of coating with known chemistry on the surface of sheds of gecko toes to study the effect that wettability of the toe surface has on its adhesion. In summary, we demonstrated that PECVD can be effectively used as means of surface chemistry control for tunable structure-property relationship of three types of structured surfaces; each having unique surface features.

  17. Encapsulant Characterization and Doped Passivated Contacts for Use in a Luminescent Solar Concentrator

    NASA Astrophysics Data System (ADS)

    Fogel, Derek

    We report progress towards encapsulant characterization and the fabrication of passivated interdigitated back contact silicon solar cells using spin-on dopants for use in a luminescent solar concentrator. For the luminescent solar concentrator to be successful, the encapsulants used to assemble the final device must not contribute to optical losses and the tandem cell must exhibit excellent passivation and low contact resistivity values. The index of refraction of polydimethylsiloxane (PDMS) is calculated to be 1.405-1.415 for 600-800 nm and 1.475-1.505 is calculated for ethylene vinyl acetate (EVA). The absorption coefficient is calculated to be less than 0.1 cm-1 for PDMS and less than 0.5 cm-1 for EVA at wavelengths less than 1000 nm. Polysilicon / SiOx passivated contact symmetric structures grown using plasma-enhanced chemical vapor deposition (PECVD) and low pressure chemical vapor deposition (LPCVD) and subsequently doped using P, B, and Ga spin-on dopants are fabricated, and their passivation and contact properties are analyzed. The n-type, P-doped passivated contact gives an implied open circuit voltage (iVOC) of 708 mV in PECVD and 727 mV in LPCVD. The p-type, B-doped passivated contact gives an iVOC of 667 mV in PECVD and 689 mV in LPCVD. The p-type, Ga-doped passivated contact, which has not been previously reported, gives an iVOC of 731 mV in PECVD and 714 mV in LPCVD. For the n-type, P-doped contact a low metal to polysilicon contact resistivity of 23.8 mO-cm2 was measured for Al on PECVD and 15.8 mO-cm2 was measured for Al on LPCVD. For the p-type, B-doped contact a low metal to polysilicon contact resistivity of 0.3 mO-cm2 was measured for Al on LPCVD. These results are encouraging for the processing of passivated interdigitated back contact solar cells, and present a route towards high-efficiency Si PV at low cost.

  18. Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition

    NASA Astrophysics Data System (ADS)

    Carcia, P. F.; McLean, R. S.; Groner, M. D.; Dameron, A. A.; George, S. M.

    2009-07-01

    Thin films grown by Al2O3 atomic layer deposition (ALD) and SiN plasma-enhanced chemical vapor deposition (PECVD) have been tested as gas diffusion barriers either individually or as bilayers on polymer substrates. Single films of Al2O3 ALD with thicknesses of ≥10 nm had a water vapor transmission rate (WVTR) of ≤5×10-5 g/m2 day at 38 °C/85% relative humidity (RH), as measured by the Ca test. This WVTR value was limited by H2O permeability through the epoxy seal, as determined by the Ca test for the glass lid control. In comparison, SiN PECVD films with a thickness of 100 nm had a WVTR of ˜7×10-3 g/m2 day at 38 °C/85% RH. Significant improvements resulted when the SiN PECVD film was coated with an Al2O3 ALD film. An Al2O3 ALD film with a thickness of only 5 nm on a SiN PECVD film with a thickness of 100 nm reduced the WVTR from ˜7×10-3 to ≤5×10-5 g/m2 day at 38 °C/85% RH. The reduction in the permeability for Al2O3 ALD on the SiN PECVD films was attributed to either Al2O3 ALD sealing defects in the SiN PECVD film or improved nucleation of Al2O3 ALD on SiN.

  19. Optical, mechanical and surface properties of amorphous carbonaceous thin films obtained by plasma enhanced chemical vapor deposition and plasma immersion ion implantation and deposition

    NASA Astrophysics Data System (ADS)

    Turri, Rafael G.; Santos, Ricardo M.; Rangel, Elidiane C.; da Cruz, Nilson C.; Bortoleto, José R. R.; Dias da Silva, José H.; Antonio, César Augusto; Durrant, Steven F.

    2013-09-01

    Diverse amorphous hydrogenated carbon-based films (a-C:H, a-C:H:F, a-C:H:N, a-C:H:Cl and a-C:H:Si:O) were obtained by radiofrequency plasma enhanced chemical vapor deposition (PECVD) and plasma immersion ion implantation and deposition (PIIID). The same precursors were used in the production of each pair of each type of film, such as a-C:H, using both PECVD and PIIID. Optical properties, namely the refractive index, n, absorption coefficient, α, and optical gap, ETauc, of these films were obtained via transmission spectra in the ultraviolet-visible near-infrared range (wavelengths from 300 to 3300 nm). Film hardness, elastic modulus and stiffness were obtained as a function of depth using nano-indentation. Surface energy values were calculated from liquid drop contact angle data. Film roughness and morphology were assessed using atomic force microscopy (AFM). The PIIID films were usually thinner and possessed higher refractive indices than the PECVD films. Determined refractive indices are consistent with literature values for similar types of films. Values of ETauc were increased in the PIIID films compared to the PECVD films. An exception was the a-C:H:Si:O films, for which that obtained by PIIID was thicker and exhibited a decreased ETauc. The mechanical properties - hardness, elastic modulus and stiffness - of films produced by PECVD and PIIID generally present small differences. An interesting effect is the increase in the hardness of a-C:H:Cl films from 1.0 to 3.0 GPa when ion implantation is employed. Surface energy correlates well with surface roughness. The implanted films are usually smoother than those obtained by PECVD.

  20. Plasma-deposited amorphous silicon carbide films for micromachined fluidic channels

    NASA Astrophysics Data System (ADS)

    Wuu, Dong-Sing; Horng, Ray-Hua; Chan, Chia-Chi; Lee, Yih-Shing

    1999-04-01

    The stress properties of the a-SiC:H films on Si by plasma-enhanced chemical vapor deposition (PECVD) are investigated. It is found that the stability of the a-SiC:H films relates to Si-H bonds breaking and changes the stress toward tensile. No evident reduction in the content of Si-H bonds after thermal cycles was found in the carbon-rich samples. Moreover, a new method to fabricate microchannels by through-hole etching with subsequent planarization is proposed. The process is based on etching out the deep grooves through a perforated a-SiC:H membrane, where poly-Si is used as a sacrificial layer to define the channel structure, followed by PECVD sealing the SiC:H membrane. In order to improve the etching performance, the agitated KOH etch is performed at low temperatures (<50°C). The process technology is demonstrated on the fabrication of microfluidic channels with the low-stress (<0.1 GPa) a-SiC:H membranes.

  1. Development of Advanced Deposition Technology for Microcrystalline Si Based Solar Cells and Modules: Final Technical Report, 1 May 2002-31 July 2004

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Li, Y. M.

    2004-12-01

    The key objective of this subcontract was to take the first steps to extend the radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) manufacturing technology of Energy Photovoltaics, Inc. (EPV), to the promising field of a-Si/nc-Si solar cell fabrication by demonstrating ''proof-of-concept'' devices of good efficiencies that previously were believed to be unobtainable in single-chamber reactors owing to contamination problems. A complementary goal was to find a new high-rate deposition method that can conceivably be deployed in large PECVD-type reactors. We emphasize that our goal was not to produce 'champion' devices of near-record efficiencies, but rather, to achieve modestly high efficiencies usingmore » a far simpler (cheaper) system, via practical processing methods and materials. To directly attack issues in solar-cell fabrication at EPV, the nc-Si thin films were studied almost exclusively in the p-i-n device configuration (as absorbers or i-layers), not as stand-alone films. Highly efficient, p-i-n type, nc-Si-based solar cells are generally grown on expensive, laboratory superstrates, such as custom ZnO/glass of high texture (granular surface) and low absorption. Also standard was the use of a highly effective back-reflector ZnO/Ag, where the ZnO can be surface-textured for efficient diffuse reflection. The high-efficiency ''champion'' devices made by the PECVD methods were invariably prepared in sophisticated (i.e., expensive), multi-chamber, or at least load-locked deposition systems. The electrode utilization efficiency, defined as the surface-area ratio of the powered electrode to that of the substrates, was typically low at about one (1:1). To evaluate the true potential of nc-Si absorbers for cost-competitive, commercially viable manufacturing of large-area PV modules, we took a more down-to-earth approach, based on our proven production of a-Si PV modules by a massively parallel batch process in single-chamber RF-PECVD systems, to the study of nc-Si solar cells, with the aim of producing high-efficiency a-Si/nc-Si solar cells and sub-modules.« less

  2. PECVD silicon-rich nitride and low stress nitride films mechanical characterization using membrane point load deflection

    NASA Astrophysics Data System (ADS)

    Bagolini, Alvise; Picciotto, Antonino; Crivellari, Michele; Conci, Paolo; Bellutti, Pierluigi

    2016-02-01

    An analysis of the mechanical properties of plasma enhanced chemical vapor (PECVD) silicon nitrides is presented, using micro fabricated silicon nitride membranes under point load deflection. The membranes are made of PECVD silicon-rich nitride and low stress nitride films. The mechanical performance of the bended membranes is examined both with analytical models and finite element simulation in order to extract the elastic modulus and residual stress values. The elastic modulus of low stress silicon nitride is calculated using stress free analytical models, while for silicon-rich silicon nitride and annealed low stress silicon nitride it is estimated with a pre-stressed model of point-load deflection. The effect of annealing both in nitrogen and hydrogen atmosphere is evaluated in terms of residual stress, refractive index and thickness variation. It is demonstrated that a hydrogen rich annealing atmosphere induces very little change in low stress silicon nitride. Nitrogen annealing effects are measured and shown to be much higher in silicon-rich nitride than in low stress silicon nitride. An estimate of PECVD silicon-rich nitride elastic modulus is obtained in the range between 240-320 GPa for deposited samples and 390 GPa for samples annealed in nitrogen atmosphere. PECVD low stress silicon nitride elastic modulus is estimated to be 88 GPa as deposited and 320 GPa after nitrogen annealing.

  3. Experimental and theoretical rationalization of the growth mechanism of silicon quantum dots in non-stoichiometric SiN x : role of chlorine in plasma enhanced chemical vapour deposition

    NASA Astrophysics Data System (ADS)

    Mon-Pérez, E.; Salazar, J.; Ramos, E.; Santoyo Salazar, J.; López Suárez, A.; Dutt, A.; Santana, G.; Marel Monroy, B.

    2016-11-01

    Silicon quantum dots (Si-QDs) embedded in an insulator matrix are important from a technological and application point of view. Thus, being able to synthesize them in situ during the matrix growth process is technologically advantageous. The use of SiH2Cl2 as the silicon precursor in the plasma enhanced chemical vapour deposition (PECVD) process allows us to obtain Si-QDs without post-thermal annealing. Foremost in this work, is a theoretical rationalization of the mechanism responsible for Si-QD generation in a film including an analysis of the energy released by the extraction of HCl and the insertion of silylene species into the terminal surface bonds. From the results obtained using density functional theory (DFT), we propose an explanation of the mechanism responsible for the formation of Si-QDs in non-stoichiometric SiN x starting from chlorinated precursors in a PECVD system. Micrograph images obtained through transmission electron microscopy confirmed the presence of Si-QDs, even in nitrogen-rich (N-rich) samples. The film stoichiometry was controlled by varying the growth parameters, in particular the NH3/SiH2Cl2 ratio and hydrogen dilution. Experimental and theoretical results together show that using a PECVD system, along with chlorinated precursors it is possible to obtain Si-QDs at a low substrate temperature without annealing treatment. The optical property studies carried out in the present work highlight the prospects of these thin films for down shifting and as an antireflection coating in silicon solar cells.

  4. Optimization of PECVD Chamber Cleans Through Fundamental Studies of Electronegative Fluorinated Gas Discharges.

    NASA Astrophysics Data System (ADS)

    Langan, John

    1996-10-01

    The predominance of multi-level metalization schemes in advanced integrated circuit manufacturing has greatly increased the importance of plasma enhanced chemical vapor deposition (PECVD) and in turn in-situ plasma chamber cleaning. In order to maintain the highest throughput for these processes the clean step must be as short as possible. In addition, there is an increasing desire to minimize the fluorinated gas usage during the clean, while maximizing its efficiency, not only to achieve lower costs, but also because many of the gases used in this process are global warming compounds. We have studied the fundamental properties of discharges of NF_3, CF_4, and C_2F6 under conditions relevant to chamber cleaning in the GEC rf reference cell. Using electrical impedance analysis and optical emission spectroscopy we have determined that the electronegative nature of these discharges defines the optimal processing conditions by controlling the power coupling efficiency and mechanisms of power dissipation in the discharge. Examples will be presented where strategies identified by these studies have been used to optimize actual manufacturing chamber clean processes. (This work was performed in collaboration with Mark Sobolewski, National Institute of Standards and Technology, and Brian Felker, Air Products and Chemicals, Inc.)

  5. Low Temperature Graphene Growth and Its Applications in Electronic and Optical Devices

    NASA Astrophysics Data System (ADS)

    Chugh, Sunny

    Graphene, a two dimensional allotrope of carbon in a honeycomb lattice, has gathered wide attention due to its excellent electrical, thermal, optical and mechanical properties. It has extremely high electron/hole mobility, very high thermal conductivity and fascinating optical properties, and combined with its mechanical strength and elasticity, graphene is believed to find commercial applications in existing as well as novel technologies. One of the biggest reasons behind the rapid development in graphene research during the last decade is the fact that laboratory procedures to obtain high quality graphene are rather cheap and simple. However, any new material market is essentially driven by the progress in its large scale commercial production with minimal costs, with properties that are suited for different applications. And it is in this aspect that graphene is still required to make a huge progress before its commercial benefits can be derived. Laboratory graphene synthesis techniques such as mechanical exfoliation, liquid phase exfoliation and SiC graphene growth pose several challenges in terms of cost, reliability and scalability. To this end, Chemical Vapor Deposition (CVD) growth of graphene has emerged as a widely used synthesis method that overcomes these problems. Unfortunately, conventional thermal CVD requires a high temperature of growth and a catalytic metal substrate, making the undesirable step of graphene transfer a necessity. Besides requiring a catalyst, the high temperature of growth also limits the range of growth substrates. In this work, I have successfully demonstrated low temperature ( 550 °C) growth of graphene directly on dielectric materials using a Plasma-Enhanced CVD (PECVD) process. The PECVD technique described here solves the issues faced by conventional CVD methods and provides a direct route for graphene synthesis on arbitrary materials at relatively low temperatures. Detailed growth studies, as described here, illustrate the difference between the PECVD and the CVD growth mechanisms. This work also provides the first experimental comparison of graphene growth rates on different substrates using PECVD. In the second part of my thesis, I have discussed some of the potential applications of PECVD graphene, including graphene as a diffusion barrier, ultra-dark graphene metamaterials, graphene-protected metal plasmonics and copper-graphene hybrids for RF transmission line applications. The experimental findings discussed here lay a solid platform for integration of graphene in damascene structures, low-loss plasmonic materials, flexible electronics and dark materials, among others.

  6. Electron beam induced damage in PECVD Si3N4 and SiO2 films on InP

    NASA Technical Reports Server (NTRS)

    Pantic, Dragan M.; Kapoor, Vik J.; Young, Paul G.; Williams, Wallace D.; Dickman, John E.

    1990-01-01

    Phosphorus rich plasma enhanced chemical vapor deposition (PECVD) of silicon nitride and silicon dioxide films on n-type indium phosphide (InP) substrates were exposed to electron beam irradiation in the 5 to 40 keV range for the purpose of characterizing the damage induced in the dielectic. The electron beam exposure was on the range of 10(exp -7) to 10(exp -3) C/sq cm. The damage to the devices was characterized by capacitance-voltage (C-V) measurements of the metal insulator semiconductor (MIS) capacitors. These results were compared to results obtained for radiation damage of thermal silicon dioxide on silicon (Si) MOS capacitors with similar exposures. The radiation induced damage in the PECVD silicon nitride films on InP was successfully annealed out in an hydrogen/nitrogen (H2/N2) ambient at 400 C for 15 min. The PECVD silicon dioxide films on InP had the least radiation damage, while the thermal silicon dioxide films on Si had the most radiation damage.

  7. Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon.

    PubMed

    Chen, Wanghua; Cariou, Romain; Hamon, Gwenaëlle; Léal, Ronan; Maurice, Jean-Luc; Cabarrocas, Pere Roca I

    2017-03-06

    Solar cells based on epitaxial silicon layers as the absorber attract increasing attention because of the potential cost reduction. In this work, we studied the influence of the deposition rate on the structural properties of epitaxial silicon layers produced by plasma-enhanced chemical vapor deposition (epi-PECVD) using silane as a precursor and hydrogen as a carrier gas. We found that the crystalline quality of epi-PECVD layers depends on their thickness and deposition rate. Moreover, increasing the deposition rate may lead to epitaxy breakdown. In that case, we observe the formation of embedded amorphous silicon cones in the epi-PECVD layer. To explain this phenomenon, we develop a model based on the coupling of hydrogen and built-in strain. By optimizing the deposition conditions to avoid epitaxy breakdown, including substrate temperatures and plasma potential, we have been able to synthesize epi-PECVD layers up to a deposition rate of 8.3 Å/s. In such case, we found that the incorporation of hydrogen in the hydrogenated crystalline silicon can reach 4 at. % at a substrate temperature of 350 °C.

  8. Influence of deposition rate on the structural properties of plasma-enhanced CVD epitaxial silicon

    PubMed Central

    Chen, Wanghua; Cariou, Romain; Hamon, Gwenaëlle; Léal, Ronan; Maurice, Jean-Luc; Cabarrocas, Pere Roca i

    2017-01-01

    Solar cells based on epitaxial silicon layers as the absorber attract increasing attention because of the potential cost reduction. In this work, we studied the influence of the deposition rate on the structural properties of epitaxial silicon layers produced by plasma-enhanced chemical vapor deposition (epi-PECVD) using silane as a precursor and hydrogen as a carrier gas. We found that the crystalline quality of epi-PECVD layers depends on their thickness and deposition rate. Moreover, increasing the deposition rate may lead to epitaxy breakdown. In that case, we observe the formation of embedded amorphous silicon cones in the epi-PECVD layer. To explain this phenomenon, we develop a model based on the coupling of hydrogen and built-in strain. By optimizing the deposition conditions to avoid epitaxy breakdown, including substrate temperatures and plasma potential, we have been able to synthesize epi-PECVD layers up to a deposition rate of 8.3 Å/s. In such case, we found that the incorporation of hydrogen in the hydrogenated crystalline silicon can reach 4 at. % at a substrate temperature of 350 °C. PMID:28262840

  9. Preparation of Hydrophobic Metal-Organic Frameworks via Plasma Enhanced Chemical Vapor Deposition of Perfluoroalkanes for the Removal of Ammonia

    PubMed Central

    DeCoste, Jared B.; Peterson, Gregory W.

    2013-01-01

    Plasma enhanced chemical vapor deposition (PECVD) of perfluoroalkanes has long been studied for tuning the wetting properties of surfaces. For high surface area microporous materials, such as metal-organic frameworks (MOFs), unique challenges present themselves for PECVD treatments. Herein the protocol for development of a MOF that was previously unstable to humid conditions is presented. The protocol describes the synthesis of Cu-BTC (also known as HKUST-1), the treatment of Cu-BTC with PECVD of perfluoroalkanes, the aging of materials under humid conditions, and the subsequent ammonia microbreakthrough experiments on milligram quantities of microporous materials. Cu-BTC has an extremely high surface area (~1,800 m2/g) when compared to most materials or surfaces that have been previously treated by PECVD methods. Parameters such as chamber pressure and treatment time are extremely important to ensure the perfluoroalkane plasma penetrates to and reacts with the inner MOF surfaces. Furthermore, the protocol for ammonia microbreakthrough experiments set forth here can be utilized for a variety of test gases and microporous materials. PMID:24145623

  10. Vertically aligned carbon nanofibers and related structures: Controlled synthesis and directed assembly

    NASA Astrophysics Data System (ADS)

    Melechko, A. V.; Merkulov, V. I.; McKnight, T. E.; Guillorn, M. A.; Klein, K. L.; Lowndes, D. H.; Simpson, M. L.

    2005-02-01

    The controlled synthesis of materials by methods that permit their assembly into functional nanoscale structures lies at the crux of the emerging field of nanotechnology. Although only one of several materials families is of interest, carbon-based nanostructured materials continue to attract a disproportionate share of research effort, in part because of their wide-ranging properties. Additionally, developments of the past decade in the controlled synthesis of carbon nanotubes and nanofibers have opened additional possibilities for their use as functional elements in numerous applications. Vertically aligned carbon nanofibers (VACNFs) are a subclass of carbon nanostructured materials that can be produced with a high degree of control using catalytic plasma-enhanced chemical-vapor deposition (C-PECVD). Using C-PECVD the location, diameter, length, shape, chemical composition, and orientation can be controlled during VACNF synthesis. Here we review the CVD and PECVD systems, growth control mechanisms, catalyst preparation, resultant carbon nanostructures, and VACNF properties. This is followed by a review of many of the application areas for carbon nanotubes and nanofibers including electron field-emission sources, electrochemical probes, functionalized sensor elements, scanning probe microscopy tips, nanoelectromechanical systems (NEMS), hydrogen and charge storage, and catalyst support. We end by noting gaps in the understanding of VACNF growth mechanisms and the challenges remaining in the development of methods for an even more comprehensive control of the carbon nanofiber synthesis process.

  11. The role of plasma chemistry on functional silicon nitride film properties deposited at low-temperature by mixing two frequency powers using PECVD.

    PubMed

    Sahu, B B; Yin, Y Y; Tsutsumi, T; Hori, M; Han, Jeon G

    2016-05-14

    Control of the plasma densities and energies of the principal plasma species is crucial to induce modification of the plasma reactivity, chemistry, and film properties. This work presents a systematic and integrated approach to the low-temperature deposition of hydrogenated amorphous silicon nitride films looking into optimization and control of the plasma processes. Radiofrequency (RF) and ultrahigh frequency (UHF) power are combined to enhance significantly the nitrogen plasma and atomic-radical density to enforce their effect on film properties. This study presents an extensive investigation of the influence of combining radiofrequency (RF) and ultrahigh frequency (UHF) power as a power ratio (PR = RF : UHF), ranging from 4 : 0 to 0 : 4, on the compositional, structural, and optical properties of the synthesized films. The data reveal that DF power with a characteristic bi-Maxwellian electron energy distribution function (EEDF) is effectively useful for enhancing the ionization and dissociation of neutrals, which in turn helps in enabling high rate deposition with better film properties than that of SF operations. Utilizing DF PECVD, a wide-bandgap of ∼3.5 eV with strong photoluminescence features can be achieved only by using a high-density plasma and high nitrogen atom density at room temperature. The present work also proposes the suitability of the DF PECVD approach for industrial applications.

  12. Effectiveness of plasma and radical control for the low temperature synthesis and properties of a-SiNx:H films using RF-near microwave PECVD

    NASA Astrophysics Data System (ADS)

    Sahu, Bibhuti Bhusan; Toyoda, Hirotaka; Han, Jeon Geon

    2018-02-01

    By mixing and alternating power conditions of radio frequency and microwave plasma sources, a detailed study of a-SiNx:H films in the SiH4/N2 plasma enhanced chemical vapour deposition processes is undertaken. Data reveal a remarkable coherence between the deposition conditions, material's quality, bond densities, optical property, and stoichiometry of the films. The film composition can simply vary from Si-rich to N-rich by incorporating suitable plasma and atomic radical parameters. Highly transparent and wide bandgap films with N to Si and N to H atomic ratios up to ˜2.3 and 3.1, respectively, are prepared by controlling the plasma parameters and radicals. The presented results pave the way for dual frequency PECVD utilization in a-SiNx:H films for their use in controlled-bandgap nanodevices and light emitting applications.

  13. One-step microwave plasma enhanced chemical vapor deposition (MW-PECVD) for transparent superhydrophobic surface

    NASA Astrophysics Data System (ADS)

    Thongrom, Sukrit; Tirawanichakul, Yutthana; Munsit, Nantakan; Deangngam, Chalongrat

    2018-02-01

    We demonstrate a rapid and environmental friendly fabrication technique to produce optically clear superhydrophobic surfaces using poly (dimethylsiloxane) (PDMS) as a sole coating material. The inert PDMS chain is transformed into a 3-D irregular solid network through microwave plasma enhanced chemical vapor deposition (MW-PECVD) process. Thanks to high electron density in the microwave-activated plasma, coating can be done in just a single step with rapid deposition rate, typically much shorter than 10 s. Deposited layers show excellent superhydrophobic properties with water contact angles of ∼170° and roll-off angles as small as ∼3°. The plasma-deposited films can be ultrathin with thicknesses under 400 nm, greatly diminishing the optical loss. Moreover, with appropriate coating conditions, the coating layer can even enhance the transmission over the entire visible spectrum due to a partial anti-reflection effect.

  14. Experimental and theoretical rationalization of the growth mechanism of silicon quantum dots in non-stoichiometric SiN x : role of chlorine in plasma enhanced chemical vapour deposition.

    PubMed

    Mon-Pérez, E; Salazar, J; Ramos, E; Salazar, J Santoyo; Suárez, A López; Dutt, A; Santana, G; Monroy, B Marel

    2016-11-11

    Silicon quantum dots (Si-QDs) embedded in an insulator matrix are important from a technological and application point of view. Thus, being able to synthesize them in situ during the matrix growth process is technologically advantageous. The use of SiH 2 Cl 2 as the silicon precursor in the plasma enhanced chemical vapour deposition (PECVD) process allows us to obtain Si-QDs without post-thermal annealing. Foremost in this work, is a theoretical rationalization of the mechanism responsible for Si-QD generation in a film including an analysis of the energy released by the extraction of HCl and the insertion of silylene species into the terminal surface bonds. From the results obtained using density functional theory (DFT), we propose an explanation of the mechanism responsible for the formation of Si-QDs in non-stoichiometric SiN x starting from chlorinated precursors in a PECVD system. Micrograph images obtained through transmission electron microscopy confirmed the presence of Si-QDs, even in nitrogen-rich (N-rich) samples. The film stoichiometry was controlled by varying the growth parameters, in particular the NH 3 /SiH 2 Cl 2 ratio and hydrogen dilution. Experimental and theoretical results together show that using a PECVD system, along with chlorinated precursors it is possible to obtain Si-QDs at a low substrate temperature without annealing treatment. The optical property studies carried out in the present work highlight the prospects of these thin films for down shifting and as an antireflection coating in silicon solar cells.

  15. A novel passivation process of silicon nanowires by a low-cost PECVD technique for deposition of hydrogenated silicon nitride using SiH4 and N2 as precursor gases

    NASA Astrophysics Data System (ADS)

    Bouaziz, Lamia; Dridi, Donia; Karyaoui, Mokhtar; Angelova, Todora; Sanchez Plaza, Guillermo; Chtourou, Radhouane

    2017-03-01

    In this work, a different SiNx passivation process of silicon nanowires has been opted for the deposition of a hydrogenated silicon nitride (SiNx:H) by a low-cost plasma enhanced chemical vapor deposition (PECVD) using silane ( SiH4 and nitrogen ( N2 as reactive gases. This study is focused on the effect of the gas flow ratio on chemical composition, morphological, optical and optoelectronic properties of silicon nanowires. The existence of Si-N and Si-H bonds was proven by the Fourier transmission infrared (FTIR) spectrum. Morphological structures were shown by scanning electron microscopy (SEM), and the roughness was investigated by atomic force microscopy (AFM). A low reflectivity less than 6% in the wavelength range 250-1200nm has been shown by UV-visible spectroscopy. Furthermore, the thickness and the refractive index of the passivation layer is determined by ellipsometry measurements. As a result, an improvement in minority carrier lifetime has been obtained by reducing surface recombination of silicon nanowires.

  16. Plasma deposition of silver nanoparticles on ultrafiltration membranes: antibacterial and anti-biofouling properties.

    PubMed

    Cruz, Mercedes Cecilia; Ruano, Gustavo; Wolf, Marcus; Hecker, Dominic; Vidaurre, Elza Castro; Schmittgens, Ralph; Rajal, Verónica Beatriz

    2015-02-01

    A novel and versatile plasma reactor was used to modify Polyethersulphone commercial membranes. The equipment was applied to: i) functionalize the membranes with low-temperature plasmas, ii) deposit a film of poly(methyl methacrylate) (PMMA) by Plasma Enhanced Chemical Vapor Deposition (PECVD) and, iii) deposit silver nanoparticles (SNP) by Gas Flow Sputtering. Each modification process was performed in the same reactor consecutively, without exposure of the membranes to atmospheric air. Scanning electron microscopy and transmission electron microscopy were used to characterize the particles and modified membranes. SNP are evenly distributed on the membrane surface. Particle fixation and transport inside membranes were assessed before- and after-washing assays by X-ray photoelectron spectroscopy depth profiling analysis. PMMA addition improved SNP fixation. Plasma-treated membranes showed higher hydrophilicity. Anti-biofouling activity was successfully achieved against Gram-positive ( Enterococcus faecalis ) and -negative ( Salmonella Typhimurium) bacteria. Therefore, disinfection by ultrafiltration showed substantial resistance to biofouling. The post-synthesis functionalization process developed provides a more efficient fabrication route for anti-biofouling and anti-bacterial membranes used in the water treatment field. To the best of our knowledge, this is the first report of a gas phase condensation process combined with a PECVD procedure in order to deposit SNP on commercial membranes to inhibit biofouling formation.

  17. Plasma deposition of silver nanoparticles on ultrafiltration membranes: antibacterial and anti-biofouling properties

    PubMed Central

    Cruz, Mercedes Cecilia; Ruano, Gustavo; Wolf, Marcus; Hecker, Dominic; Vidaurre, Elza Castro; Schmittgens, Ralph; Rajal, Verónica Beatriz

    2015-01-01

    A novel and versatile plasma reactor was used to modify Polyethersulphone commercial membranes. The equipment was applied to: i) functionalize the membranes with low-temperature plasmas, ii) deposit a film of poly(methyl methacrylate) (PMMA) by Plasma Enhanced Chemical Vapor Deposition (PECVD) and, iii) deposit silver nanoparticles (SNP) by Gas Flow Sputtering. Each modification process was performed in the same reactor consecutively, without exposure of the membranes to atmospheric air. Scanning electron microscopy and transmission electron microscopy were used to characterize the particles and modified membranes. SNP are evenly distributed on the membrane surface. Particle fixation and transport inside membranes were assessed before- and after-washing assays by X-ray photoelectron spectroscopy depth profiling analysis. PMMA addition improved SNP fixation. Plasma-treated membranes showed higher hydrophilicity. Anti-biofouling activity was successfully achieved against Gram-positive (Enterococcus faecalis) and -negative (Salmonella Typhimurium) bacteria. Therefore, disinfection by ultrafiltration showed substantial resistance to biofouling. The post-synthesis functionalization process developed provides a more efficient fabrication route for anti-biofouling and anti-bacterial membranes used in the water treatment field. To the best of our knowledge, this is the first report of a gas phase condensation process combined with a PECVD procedure in order to deposit SNP on commercial membranes to inhibit biofouling formation. PMID:26166926

  18. PECVD Growth of Carbon Nanotubes

    NASA Technical Reports Server (NTRS)

    McAninch, Ian; Arnold, James O. (Technical Monitor)

    2001-01-01

    Plasma enhanced chemical vapor deposition (PECVD), using inductively coupled plasma, has been used to grow carbon nanotubes (CNTs) and graphitic carbon fibers (GCF) on substrates sputtered with aluminum and iron catalyst. The capacitive plasma's power has been shown to cause a transition from nanotubes to nanofibers, depending on the strength of the plasma. The temperature, placement, and other factors have been shown to affect the height and density of the tube and fiber growth.

  19. Switching Vertical to Horizontal Graphene Growth Using Faraday Cage-Assisted PECVD Approach for High-Performance Transparent Heating Device.

    PubMed

    Qi, Yue; Deng, Bing; Guo, Xiao; Chen, Shulin; Gao, Jing; Li, Tianran; Dou, Zhipeng; Ci, Haina; Sun, Jingyu; Chen, Zhaolong; Wang, Ruoyu; Cui, Lingzhi; Chen, Xudong; Chen, Ke; Wang, Huihui; Wang, Sheng; Gao, Peng; Rummeli, Mark H; Peng, Hailin; Zhang, Yanfeng; Liu, Zhongfan

    2018-02-01

    Plasma-enhanced chemical vapor deposition (PECVD) is an applicable route to achieve low-temperature growth of graphene, typically shaped like vertical nanowalls. However, for transparent electronic applications, the rich exposed edges and high specific surface area of vertical graphene (VG) nanowalls can enhance the carrier scattering and light absorption, resulting in high sheet resistance and low transmittance. Thus, the synthesis of laid-down graphene (LG) is imperative. Here, a Faraday cage is designed to switch graphene growth in PECVD from the vertical to the horizontal direction by weakening ion bombardment and shielding electric field. Consequently, laid-down graphene is synthesized on low-softening-point soda-lime glass (6 cm × 10 cm) at ≈580 °C. This is hardly realized through the conventional PECVD or the thermal chemical vapor deposition methods with the necessity of high growth temperature (1000 °C-1600 °C). Laid-down graphene glass has higher transparency, lower sheet resistance, and much improved macroscopic uniformity when compare to its vertical graphene counterpart and it performs better in transparent heating devices. This will inspire the next-generation applications in low-cost transparent electronics. © 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

  20. Electrical dependence on the chemical composition of the gate dielectric in indium gallium zinc oxide thin-film transistors

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Tari, Alireza, E-mail: atari@uwaterloo.ca; Lee, Czang-Ho; Wong, William S.

    Bottom-gate thin-film transistors were fabricated by depositing a 50 nm InGaZnO (IGZO) channel layer at 150 °C on three separate gate dielectric films: (1) thermal SiO{sub 2}, (2) plasma-enhanced chemical-vapor deposition (PECVD) SiN{sub x}, and (3) a PECVD SiO{sub x}/SiN{sub x} dual-dielectric. X-ray photoelectron and photoluminescence spectroscopy showed the V{sub o} concentration was dependent on the hydrogen concentration of the underlying dielectric film. IGZO films on SiN{sub x} (high V{sub o}) and SiO{sub 2} (low V{sub o}) had the highest and lowest conductivity, respectively. A PECVD SiO{sub x}/SiN{sub x} dual-dielectric layer was effective in suppressing hydrogen diffusion from the nitride layer intomore » the IGZO and resulted in higher resistivity films.« less

  1. DOE Office of Scientific and Technical Information (OSTI.GOV)

    Anand, Venu, E-mail: venuanand@cense.iisc.ernet.in, E-mail: venuanand83@gmail.com; Shivashankar, S. A.; Nair, Aswathi R.

    Gas discharge plasmas used for thinfilm deposition by plasma-enhanced chemical vapor deposition (PECVD) must be devoid of contaminants, like dust or active species which disturb the intended chemical reaction. In atmospheric pressure plasma systems employing an inert gas, the main source of such contamination is the residual air inside the system. To enable the construction of an atmospheric pressure plasma (APP) system with minimal contamination, we have carried out fluid dynamic simulation of the APP chamber into which an inert gas is injected at different mass flow rates. On the basis of the simulation results, we have designed and builtmore » a simple, scaled APP system, which is capable of holding a 100 mm substrate wafer, so that the presence of air (contamination) in the APP chamber is minimized with as low a flow rate of argon as possible. This is examined systematically by examining optical emission from the plasma as a function of inert gas flow rate. It is found that optical emission from the plasma shows the presence of atmospheric air, if the inlet argon flow rate is lowered below 300 sccm. That there is minimal contamination of the APP reactor built here, was verified by conducting an atmospheric pressure PECVD process under acetylene flow, combined with argon flow at 100 sccm and 500 sccm. The deposition of a polymer coating is confirmed by infrared spectroscopy. X-ray photoelectron spectroscopy shows that the polymer coating contains only 5% of oxygen, which is comparable to the oxygen content in polymer deposits obtained in low-pressure PECVD systems.« less

  2. The application of pulse modulated plasma to the plasma enhanced chemical vapor deposition of dielectric materials

    NASA Astrophysics Data System (ADS)

    Qi, Yu

    This dissertation work applied the pulse modulated plasma to the plasma enhanced chemical vapor deposition (PECVD) of two types of dielectric materials: SiO2-like coatings and Teflon-like coatings. SiO2-like coatings were firstly implemented with continuous plasma. It was proven that three different precursors: hexamethyldisiloxane (HMDSO), 1, 3, 5, 7-tetramethylcyclotetrasiloxane (TMCTS) and octamethylcyclotetrasiloxane (OMCTS) can be used to generate hard, clear and high density SiO2 deposition with coupled high growth rate and low processing temperature via PECVD. Under similar conditions, HMDSO has the lowest growth rate, lowest hardness and highest carbon content; TMCTS has the highest growth rate and hardness, and lowest carbon content; and OMCTS has moderate rates of these deposition qualities, but the best corrosion resistance. Substrate bias seems to have no effect on any deposition quality. High chamber pressure can significantly lower the carbon content in the thin films but does not affect any other qualities; the O2/precursor ratio is the most influential factor among all variables considered in this experiment. The deposition hardness and O:Si ratio always increase with this ratio while the carbon content always decreases. However, different precursors require different optimal ratios to achieve the highest growth rate. Pulse modulation was introduced into PECVD of SiO2-like coatings and OMCTS was selected as the precursor. It was demonstrated that pulse frequency, duty ratio and peak power have significant effects on deposition qualities. The proper combination of the pulse parameters and other traditional plasma parameters can significantly lower the processing temperature while retaining or even improving other deposition qualities, such as growth rate, corrosion resistance and elemental composition. Hardness is the only sacrifice of the lower time-average power caused by pulsing. Therefore, pulse modulation can effectively expand the possible range of combinations of desired deposition qualities. Finally, the pulsed plasma was used to implement PECVD of teflon-like coatings. An important discovery in this application is that in addition to pulse period, on-time and on-time peak power, the power level during the off-time is an important factor. The density of CF2 is a function of all these pulse parameters. The best result obtained is up to 67.2% CF2 and a 1.87:1 of F:C ratio when the off-time power level is ˜100--130 W the frequency is several Hz, the on-time peak power is ˜1000 W and the duty ratio is ˜7--10%.

  3. Influence of Chemical Composition and Structure in Silicon Dielectric Materials on Passivation of Thin Crystalline Silicon on Glass.

    PubMed

    Calnan, Sonya; Gabriel, Onno; Rothert, Inga; Werth, Matteo; Ring, Sven; Stannowski, Bernd; Schlatmann, Rutger

    2015-09-02

    In this study, various silicon dielectric films, namely, a-SiOx:H, a-SiNx:H, and a-SiOxNy:H, grown by plasma enhanced chemical vapor deposition (PECVD) were evaluated for use as interlayers (ILs) between crystalline silicon and glass. Chemical bonding analysis using Fourier transform infrared spectroscopy showed that high values of oxidant gases (CO2 and/or N2), added to SiH4 during PECVD, reduced the Si-H and N-H bond density in the silicon dielectrics. Various three layer stacks combining the silicon dielectric materials were designed to minimize optical losses between silicon and glass in rear side contacted heterojunction pn test cells. The PECVD grown silicon dielectrics retained their functionality despite being subjected to harsh subsequent processing such as crystallization of the silicon at 1414 °C or above. High values of short circuit current density (Jsc; without additional hydrogen passivation) required a high density of Si-H bonds and for the nitrogen containing films, additionally, a high N-H bond density. Concurrently high values of both Jsc and open circuit voltage Voc were only observed when [Si-H] was equal to or exceeded [N-H]. Generally, Voc correlated with a high density of [Si-H] bonds in the silicon dielectric; otherwise, additional hydrogen passivation using an active plasma process was required. The highest Voc ∼ 560 mV, for a silicon acceptor concentration of about 10(16) cm(-3), was observed for stacks where an a-SiOxNy:H film was adjacent to the silicon. Regardless of the cell absorber thickness, field effect passivation of the buried silicon surface by the silicon dielectric was mandatory for efficient collection of carriers generated from short wavelength light (in the vicinity of the glass-Si interface). However, additional hydrogen passivation was obligatory for an increased diffusion length of the photogenerated carriers and thus Jsc in solar cells with thicker absorbers.

  4. Materials-Process Interactions in Ternary Alloy Semiconductors.

    DTIC Science & Technology

    1984-08-01

    high, the surface potential can be * modulated . PECVD SiO. appears to be a viable candidate as a gate dielectric for * Irf ,fO-4A)s MISFETs...it is desirable to integrate the detectors with circuits capable of performing signal processing functions. These circuits can either be fabricated in...to be a major problem in In0. 5 3Ga 0.* 47 s. 25 S. . . . . 13821 -1 R I (a) CROSS SECTION KEYBOARD 210M ANNEALING CHAMBER GATE TRIGG TRIAC

  5. Upcycling Waste Lard Oil into Vertical Graphene Sheets by Inductively Coupled Plasma Assisted Chemical Vapor Deposition.

    PubMed

    Wu, Angjian; Li, Xiaodong; Yang, Jian; Du, Changming; Shen, Wangjun; Yan, Jianhua

    2017-10-12

    Vertical graphene (VG) sheets were single-step synthesized via inductively coupled plasma (ICP)-enhanced chemical vapor deposition (PECVD) using waste lard oil as a sustainable and economical carbon source. Interweaved few-layer VG sheets, H₂, and other hydrocarbon gases were obtained after the decomposition of waste lard oil. The influence of parameters such as temperature, gas proportion, ICP power was investigated to tune the nanostructures of obtained VG, which indicated that a proper temperature and H₂ concentration was indispensable for the synthesis of VG sheets. Rich defects of VG were formed with a high I D / I G ratio (1.29), consistent with the dense edges structure observed in electron microscopy. Additionally, the morphologies, crystalline degree, and wettability of nanostructure carbon induced by PECVD and ICP separately were comparatively analyzed. The present work demonstrated the potential of our PECVD recipe to synthesize VG from abundant natural waste oil, which paved the way to upgrade the low-value hydrocarbons into advanced carbon material.

  6. Density change and viscous flow during structural relaxation of plasma-enhanced chemical-vapor-deposited silicon oxide films

    NASA Astrophysics Data System (ADS)

    Cao, Zhiqiang; Zhang, Xin

    2004-10-01

    The structural relaxation of plasma-enhanced chemical-vapor-deposited (PECVD) silane-based silicon oxide films during thermal cycling and annealing has been studied using wafer curvature measurements. These measurements, which determine stress in the amorphous silicon oxide films, are sensitive to both plastic deformation and density changes. A quantitative case study of such changes has been done based upon the experimental results. A microstructure-based mechanism elucidates seams as a source of density change and voids as a source of plastic deformation, accompanied by a viscous flow. This theory was then used to explain a series of experimental results that are related to thermal cycling as well as annealing of PECVD silicon oxide films including stress hysteresis generation and reduction and coefficient of thermal-expansion changes. In particular, the thickness effect was examined; PECVD silicon oxide films with a thickness varying from 1to40μm were studied, as certain demanding applications in microelectromechanical systems require such thick films serving as heat/electrical insulation layers.

  7. Electron-beam induced damage in thin insulating films on compound semiconductors. M.S. Thesis, 1988

    NASA Technical Reports Server (NTRS)

    Pantic, Dragan M.

    1989-01-01

    Phosphorus rich plasma enhanced chemical vapor deposition (PECVD) of silicon nitride and silicon dioxide films on n-type indium phosphide (InP) substrates were exposed to electron-beam irradiation in the 5 to 40 keV range for the purpose of characterizing the damage induced in the dielectric. The electron-beam exposure was on the range of 10(exp -7) to 10(exp -3) C/sq cm. The damage to the devices was characterized by capacitance-voltage (C-V) measurements of the metal insulator semiconductor (MIS) capacitors. These results were compared to results obtained for radiation damage of thermal silicon dioxide on silicon (Si) MOS capacitors with similar exposures. The radiation induced damage in the PECVD silicon nitride films on InP was successfully annealed out in an hydrogen/nitrogen (H2/N2) ambient at 400 C for 15 min. The PECVD silicon dioxide films on InP had the least radiation damage, while the thermal silicon dioxide films on Si had the most radiation damage.

  8. Super-hydrophobic coatings with nano-size roughness prepared with simple PECVD method

    NASA Astrophysics Data System (ADS)

    Choi, Yoon S.; Lee, Joon S.; Jin, Su B.; Han, Jeon G.

    2013-08-01

    A simple and conventional method to synthesize nearly flat super-hydrophobic coatings was studied. Conventional plasma enhanced chemical vapour deposition (PECVD) was adopted to synthesize hydrophobic coatings on plastic and glass substrates at room temperature. Hexamethyldisilane was used as a precursor, and hydrogen gas was added to modulate the surface roughness and passivate defects, such as dangling bond and electrically uncovered polar sites rendering non-hydrophobicity. The static water contact angle (WCA) was controlled in the range 120°-160° by adjusting process parameters, especially the hydrogen flow rate and power. AFM showed that the film with a WCA of 145° has as small as 2.5 nm roughness in rms value. In the resistance test of salt water and cosmetics, this film showed excellent results owing to super-hydrophobicity and defect passivation which keeps the surface isolated from external agents. In order to exploit these results, Rare gas analysis was used to examine the process plasma and Fourier transform infrared (FTIR) was used to analyse the chemical structures of the super-hydrophobic films. In the FTIR results, the remarkable increase in the modes of Si-Hx and Si-C bonds as well as Si-CH2-Si in the film was observed indicating the defect passivation and closely packed dense film structure.

  9. Characterization of Diamond-like Carbon (DLC) films deposited by RF ICP PECVD method

    NASA Astrophysics Data System (ADS)

    Oleszkiewicz, Waldemar; Kijaszek, Wojciech; Gryglewicz, Jacek; Zakrzewski, Adrian; Gajewski, Krzysztof; Kopiec, Daniel; Kamyczek, Paulina; Popko, Ewa; Tłaczała, Marek

    2013-07-01

    The work presents the results of a research carried out with Plasmalab Plus 100 system, manufactured by Oxford Instruments Company. The system was configured for deposition of diamond-like carbon films by ICP PECVD method. The deposition processes were carried out in CH4 or CH4/H2 atmosphere and the state of the plasma was investigated by the OES method. The RF plasma was capacitively coupled by 13.56 MHz generator with supporting ICP generator (13.56 Mhz). The deposition processes were conducted in constant value of RF generator's power and resultant value of the DC Bias. The power values of RF generator was set at 70 W and the power values of ICP generator was set at 300 W. In this work we focus on the influence of DLC film's thickness on optical, electrical and structural properties of the deposited DLC films. The quality of deposited DLC layers was examined by the Raman spectroscopy, AFM microscopy and spectroscopic ellipsometry. In the investigated DLC films the calculated sp3 content was ranging from 60 % to 70 %. The films were characterized by the refractive index ranging from 2.03 to 2.1 and extinction coefficient ranging from 0.09 to 0.12.

  10. Effect of RF power density on micro- and macro-structural properties of PECVD grown hydrogenated nanocrystalline silicon thin films

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Gokdogan, Gozde Kahriman, E-mail: gozdekahriman@gmail.com; Anutgan, Tamila, E-mail: tamilaanutgan@karabuk.edu.tr

    2016-03-25

    This contribution provides the comparison between micro- and macro-structure of hydrogenated nanocrystalline silicon (nc-Si:H) thin films grown by plasma enhanced chemical vapor deposition (PECVD) technique under different RF power densities (P{sub RF}: 100−444 mW/cm{sup 2}). Micro-structure is assessed through grazing angle X-ray diffraction (GAXRD), while macro-structure is followed by surface and cross-sectional morphology via field emission scanning electron microscopy (FE-SEM). The nanocrystallite size (∼5 nm) and FE-SEM surface conglomerate size (∼40 nm) decreases with increasing P{sub RF}, crystalline volume fraction reaches maximum at 162 mW/cm{sup 2}, FE-SEM cross-sectional structure is columnar except for the film grown at 162 mW/cm{sup 2}. The dependence of previously determinedmore » ‘oxygen content–refractive index’ correlation on obtained macro-structure is investigated. Also, the effect of P{sub RF} is discussed in the light of plasma parameters during film deposition process and nc-Si:H film growth models.« less

  11. Single-Step Seeded-Growth of Graphene Nanoribbons (GNRs) via Plasma-Enhanced Chemical Vapor Deposition (PECVD)

    NASA Astrophysics Data System (ADS)

    Hsu, C.-C.; Yang, K.; Tseng, W.-S.; Li, Yiliang; Li, Yilun; Tour, J. M.; Yeh, N.-C.

    One of the main challenges in the fabrication of GNRs is achieving large-scale low-cost production with high quality. Current techniques, including lithography and unzipped carbon nanotubes, are not suitable for mass production. We have recently developed a single-step PECVD growth process of high-quality graphene sheets without any active heating. By adding some substituted aromatic as seeding molecules, we are able to rapidly grow GNRs vertically on various transition-metal substrates. The morphology and electrical properties of the GNRs are dependent on the growth parameters such as the growth time, gas flow and species of the seeding molecules. On the other hand, all GNRs exhibit strong infrared and optical absorption. From studies of the Raman spectra, scanning electron microscopic images, and x-ray/ultraviolet photoelectron spectra of these GNRs as functions of the growth parameters, we propose a model for the growth mechanism. Our findings suggest that our approach opens up a pathway to large-scale, inexpensive production of GNRs for applications to supercapacitors and solar cells. This work was supported by the Grubstake Award and NSF through IQIM at Caltech.

  12. Synthesis of graphene by cobalt-catalyzed decomposition of methane in plasma-enhanced CVD: Optimization of experimental parameters with Taguchi method

    NASA Astrophysics Data System (ADS)

    Mehedi, H.-A.; Baudrillart, B.; Alloyeau, D.; Mouhoub, O.; Ricolleau, C.; Pham, V. D.; Chacon, C.; Gicquel, A.; Lagoute, J.; Farhat, S.

    2016-08-01

    This article describes the significant roles of process parameters in the deposition of graphene films via cobalt-catalyzed decomposition of methane diluted in hydrogen using plasma-enhanced chemical vapor deposition (PECVD). The influence of growth temperature (700-850 °C), molar concentration of methane (2%-20%), growth time (30-90 s), and microwave power (300-400 W) on graphene thickness and defect density is investigated using Taguchi method which enables reaching the optimal parameter settings by performing reduced number of experiments. Growth temperature is found to be the most influential parameter in minimizing the number of graphene layers, whereas microwave power has the second largest effect on crystalline quality and minor role on thickness of graphene films. The structural properties of PECVD graphene obtained with optimized synthesis conditions are investigated with Raman spectroscopy and corroborated with atomic-scale characterization performed by high-resolution transmission electron microscopy and scanning tunneling microscopy, which reveals formation of continuous film consisting of 2-7 high quality graphene layers.

  13. The Barrier Properties of PET Coated DLC Film Deposited by Microwave Surface-Wave PECVD

    NASA Astrophysics Data System (ADS)

    Yin, Lianhua; Chen, Qiang

    2017-12-01

    In this paper we report the investigation of diamond-like carbon (DLC) deposited by microwave surface-wave plasma enhanced chemical vapor deposition (PECVD) on the polyethylene terephthalate (PET) web for the purpose of the barrier property improvement. In order to characterize the properties of DLC coatings, we used several substrates, silicon wafer, glass, and PET web and KBr tablet. The deposition rate was obtained by surface profiler based on the DLC deposited on glass substrates; Fourier transform infrared spectroscope (FTIR) was carried out on KBr tablets to investigate chemical composition and bonding structure; the morphology of the DLC coating was analyzed by atomic force microscope (AFM) on Si substrates. For the barrier properties of PET webs, we measured the oxygen transmission rate (OTR) and water vapor transmission rate (WVTR) after coated with DLC films. We addressed the film barrier property related to process parameters, such as microwave power and pulse parameter in this work. The results show that the DLC coatings can greatly improve the barrier properties of PET webs.

  14. High-Throughput Processes and Structural Characterization of Single-Nanotube Based Devices for 3D Electronics

    NASA Technical Reports Server (NTRS)

    Kaul, A. B.; Megerian, K. G.; Baron, R. L.; Jennings, A. T.; Jang, D.; Greer, J. R.

    2011-01-01

    We have developed manufacturable approaches to form single, vertically aligned carbon nanotubes, where the tubes are centered precisely, and placed within a few hundred nm of 1-1.5 micron deep trenches. These wafer-scale approaches were enabled by chemically amplified resists and inductively coupled Cryo-etchers to form the 3D nanoscale architectures. The tube growth was performed using dc plasmaenhanced chemical vapor deposition (PECVD), and the materials used for the pre-fabricated 3D architectures were chemically and structurally compatible with the high temperature (700 C) PECVD synthesis of our tubes, in an ammonia and acetylene ambient. The TEM analysis of our tubes revealed graphitic basal planes inclined to the central or fiber axis, with cone angles up to 30 deg. for the particular growth conditions used. In addition, bending tests performed using a custom nanoindentor, suggest that the tubes are well adhered to the Si substrate. Tube characteristics were also engineered to some extent, by adjusting growth parameters, such as Ni catalyst thickness, pressure and plasma power during growth.

  15. Synthesis of graphene by cobalt-catalyzed decomposition of methane in plasma-enhanced CVD: Optimization of experimental parameters with Taguchi method

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mehedi, H.-A.; Baudrillart, B.; Gicquel, A.

    2016-08-14

    This article describes the significant roles of process parameters in the deposition of graphene films via cobalt-catalyzed decomposition of methane diluted in hydrogen using plasma-enhanced chemical vapor deposition (PECVD). The influence of growth temperature (700–850 °C), molar concentration of methane (2%–20%), growth time (30–90 s), and microwave power (300–400 W) on graphene thickness and defect density is investigated using Taguchi method which enables reaching the optimal parameter settings by performing reduced number of experiments. Growth temperature is found to be the most influential parameter in minimizing the number of graphene layers, whereas microwave power has the second largest effect on crystalline qualitymore » and minor role on thickness of graphene films. The structural properties of PECVD graphene obtained with optimized synthesis conditions are investigated with Raman spectroscopy and corroborated with atomic-scale characterization performed by high-resolution transmission electron microscopy and scanning tunneling microscopy, which reveals formation of continuous film consisting of 2–7 high quality graphene layers.« less

  16. Influence of interfaces density and thermal processes on mechanical stress of PECVD silicon nitride

    NASA Astrophysics Data System (ADS)

    Picciotto, A.; Bagolini, A.; Bellutti, P.; Boscardin, M.

    2009-10-01

    The paper focuses on a particular silicon nitride thin film (SiN x) produced by plasma enahanced chemical vapor deposition (PECVD) technique with high deposition rate (26 nm/min) and low values of mechanical stress (<100 MPa). This was perfomed with mixed frequency procedure varying the modulation of high frequency at 13.56 MHz and low frequency at 308 kHz of RF power supply during the deposition, without changing the ratio of reaction gases. Low stress silicon nitride is commonly obtained by tailoring the thickness ratio of high frequency vs. low frequency silicon nitride layers. The attention of this work was directed to the influence of the number of interfaces per thickness unit on the stress characteristics of the deposited material. Two sets of wafer samples were deposited with low stress silicon nitride, with a thickness of 260 nm and 2 μm, respectively. Thermal annealing processes at 380 and 520 °C in a inert enviroment were also performed on the wafers. The Stoney-Hoffman model was used to estimate the stress values by wafer curvature measurement with a mechanical surface profilometer: the stress was calculated for the as-deposited layer, and after each annealing process. The thickness and the refractive index of the SiN x were also measured and charaterized by variable angle spectra elliposometry (VASE) techinique. The experimental measurements were performed at the MT-LAB, IRST (Istituto per la Ricerca Scientifica e Tecnologica) of Bruno Kessler Foundation for Research in Trento.

  17. Studies of Silicon Nanowires with Different Parameters — By PECVD

    NASA Astrophysics Data System (ADS)

    Leela, S.; Abirami, T.; Bhattacharya, Sekhar; Ahmed, Nafis; Monika, S.; Priya, R. Nivedha

    2016-10-01

    One-dimensional nanostructures such as nanowires have a wide range of applications. Silicon is the best competitive material for the carbon nanotubes (CNTs). Carbon and silicon have some similar and peculiar properties. Silicon nanowires (SiNWs) were synthesized using plasma enhanced chemical vapor deposition (PECVD) on p-Si (111) wafer. Gold is used as a catalyst for the growth of the SiNWs. Based on our fundamental understanding of vapor-liquid-solid (VLS) nanowire growth mechanism, different levels of growth controls have been achieved. Gold catalyst deposited and annealed at different temperatures with different thicknesses (450∘C, 500∘C and 550∘C, 600∘C, 650∘C for 4min and 8min and 3nm, 5nm, 30nm Au thickness). SiNW grown by PECVD with different carrier gases varies with flow rate. We observed the different dimensions of Si nanowires by FESEM and optimized the growth parameters to get the vertical aligned and singular Si nanowires. Optical phonon of the Si nanowires and crystallinity nature were identified by Raman spectral studies.

  18. Very low temperature materials and self-alignment technology for amorphous hydrated silicon thin film transistors fabricated on transparent large area plastic substrates

    NASA Astrophysics Data System (ADS)

    Yang, Chien-Sheng

    The purpose of this research has been to (1) explore materials prepared using plasma enhanced chemical vapor deposition (PECVD) at 110sp°C for amorphous silicon thin film transistors (TFT's) fabricated on low temperature compatible, large area flexible polyethylene terephthalate (PET) substrates, and (2) develop full self-alignment technology using selective area n+ PECVD for source/drain contacts of amorphous silicon TFT's. For item (1), silicon nitride films, as gate dielectrics of TFT's, were deposited using SiHsb4+NHsb3, SiHsb4+NHsb3+Nsb2, SiHsb4+NHsb3+He, or SiHsb4+NHsb3+Hsb2 gases. Good quality silicon nitride films can be deposited using a SiHsb4+NHsb3 gas with high NHsb3/SiHsb4 ratios, or using a SiHsb4+NHsb3+Nsb2 gas with moderate NHsb3/SiHsb4 ratios. A chemical model was proposed to explain the Nsb2 dilution effect. This model includes calculations of (a) the electron energy distribution function in a plasma, (b) rate constants of electron impact dissociation, and (3) the (NHsbx) / (SiHsby) ratio in a plasma. The Nsb2 dilution was shown to have a effect of shifting the electron energy distribution into high energy, thus enhancing the (NHsbx) / (SiHsbyrbrack ratio in a plasma and promoting the deposition of N-rich silicon nitride films, which leads to decreased trap state density and a shift in trap state density to deeper in the gap. Amorphous silicon were formed successfully at 110sp°C on large area glass and plastic(PET) substrates. Linear mobilities are 0.33 and 0.12 cmsp2/Vs for TFT's on glass and plastic substrates, respectively. ON/OFF current ratios exceed 10sp7 for TFT's on glass and 10sp6 for TFT's on PET. For item (2), a novel full self-alignment process was developed for amorphous silicon TFT's. This process includes (1) back-exposure using the bottom gate metal as the mask, and (2) selective area n+ micro-crystalline silicon PECVD for source/drain contacts of amorphous silicon TFT's. TFT's fabricated using the full self-alignment process showed linear mobilities ranging from 0.5 to 1.0 cmsp2/Vs.

  19. The silane depletion fraction as an indicator for the amorphous/crystalline silicon interface passivation quality

    NASA Astrophysics Data System (ADS)

    Descoeudres, A.; Barraud, L.; Bartlome, R.; Choong, G.; De Wolf, Stefaan; Zicarelli, F.; Ballif, C.

    2010-11-01

    In silicon heterojunction solar cells, thin amorphous silicon layers passivate the crystalline silicon wafer surfaces. By using in situ diagnostics during plasma-enhanced chemical vapor deposition (PECVD), the authors report how the passivation quality of such layers directly relate to the plasma conditions. Good interface passivation is obtained from highly depleted silane plasmas. Based upon this finding, layers deposited in a large-area very high frequency (40.68 MHz) PECVD reactor were optimized for heterojunction solar cells, yielding aperture efficiencies up to 20.3% on 4 cm2 cells.

  20. Confocal Raman studies in determining crystalline nature of PECVD grown Si nanowires

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Ahmed, Nafis; Bhargav, P. Balaji; Ramasamy, P.

    2015-06-24

    Silicon nanowires of diameter ∼200 nm and length of 2-4 µm are grown in the plasma enhanced chemical vapour deposition technique using nanoclustered Au catalyst assisted vapour-liquid-solid process. The crystallinity in the as-grown and annealed samples is studied using confocal Raman spectroscopic studies. Amorphous phase is formed in the as-grown samples. Structural studies using high resolution transmission electron microscopy confirm the polycrystalline nature in the annealed sample.

  1. Residual Stress and Fracture of PECVD Thick Oxide Films for Power MEMS Structures and Devices

    DTIC Science & Technology

    2007-06-01

    Residual stress leads to large overall wafer bow, which makes further processing difficult. For example some microfabrication machines , such as chemical...curvature will be measured across the wafer surface in 12 scans, rotating 24 the wafer by 300 between each scan. In situ wafer curvature will be...SiOx. 4.1. Introduction As introduced earlier (Sec.1), in Power MEMS (micro energy- harvesting devices such as micro heat engines and related components

  2. Carbon Nanotube Field Emitters Synthesized on Metal Alloy Substrate by PECVD for Customized Compact Field Emission Devices to Be Used in X-Ray Source Applications.

    PubMed

    Park, Sangjun; Gupta, Amar Prasad; Yeo, Seung Jun; Jung, Jaeik; Paik, Sang Hyun; Mativenga, Mallory; Kim, Seung Hoon; Shin, Ji Hoon; Ahn, Jeung Sun; Ryu, Jehwang

    2018-05-29

    In this study, a simple, efficient, and economical process is reported for the direct synthesis of carbon nanotube (CNT) field emitters on metal alloy. Given that CNT field emitters can be customized with ease for compact and cold field emission devices, they are promising replacements for thermionic emitters in widely accessible X-ray source electron guns. High performance CNT emitter samples were prepared in optimized plasma conditions through the plasma-enhanced chemical vapor deposition (PECVD) process and subsequently characterized by using a scanning electron microscope, tunneling electron microscope, and Raman spectroscopy. For the cathode current, field emission (FE) characteristics with respective turn on (1 μA/cm²) and threshold (1 mA/cm²) field of 2.84 and 4.05 V/μm were obtained. For a field of 5.24 V/μm, maximum current density of 7 mA/cm² was achieved and a field enhancement factor β of 2838 was calculated. In addition, the CNT emitters sustained a current density of 6.7 mA/cm² for 420 min under a field of 5.2 V/μm, confirming good operational stability. Finally, an X-ray generated image of an integrated circuit was taken using the compact field emission device developed herein.

  3. Deposition kinetics and characterization of stable ionomers from hexamethyldisiloxane and methacrylic acid by plasma enhanced chemical vapor deposition

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Urstöger, Georg; Resel, Roland; Coclite, Anna Maria, E-mail: anna.coclite@tugraz.at

    2016-04-07

    A novel ionomer of hexamethyldisiloxane and methacrylic acid was synthesized by plasma enhanced chemical vapor deposition (PECVD). The PECVD process, being solventless, allows mixing of monomers with very different solubilities, and for polymers formed at high deposition rates and with high structural stability (due to the high number of cross-links and covalent bonding to the substrate) to be obtained. A kinetic study over a large set of parameters was run with the aim of determining the optimal conditions for high stability and proton conductivity of the polymer layer. Copolymers with good stability over 6 months' time in air and watermore » were obtained, as demonstrated by ellipsometry, X-Ray reflectivity, and FT-IR spectroscopy. Stable coatings showed also proton conductivity as high as 1.1 ± 0.1 mS cm{sup −1}. Chemical analysis showed that due to the high molecular weight of the chosen precursors, it was possible to keep the plasma energy-input-per-mass low. This allowed limited precursor fragmentation and the functional groups of both monomers to be retained during the plasma polymerization.« less

  4. The effect of copper substrate’s roughness on graphene growth process via PECVD

    NASA Astrophysics Data System (ADS)

    Fan, Tengfei; Yan, Cuixia; Lu, Jianchen; Zhang, Lianchang; Cai, Jinming

    2018-04-01

    Despite many excellent properties, the synthesis of high quality graphene with low-cost way is still a challenge, thus many different factors have been researched. In this work, the effect of surface roughness to the graphene quality was studied. Graphene was synthesized by plasma enhanced chemical vapor deposition (PECVD) method on copper substrates with different roughness from 0.074 μm to 0.339 μm, which were prepared via annealing, corrosion or polishing, respectively. Ar+ plasma cleaning was applied before graphene growth in order to accommodate similar surface chemical reactivity to each other. Scanning electron microscope and Raman spectroscope were employed to investigate the effect of surface roughness, which reveals that the graphene quality decrease first and then increase again according to the ratio of ID/IG in Raman spectroscopy. When the ratio of ID/IG reaches the largest number, the substrate roughness is 0.127 μm, where is the graphene quality changing point. First principle calculation was applied to explain the phenomenon and revealed that it is strongly affected by the graphene grain size and quantity which can induce defects. This strategy is expected to guide the industrial production of graphene.

  5. Transport mechanisms through PE-CVD coatings: influence of temperature, coating properties and defects on permeation of water vapour

    NASA Astrophysics Data System (ADS)

    Kirchheim, Dennis; Jaritz, Montgomery; Mitschker, Felix; Gebhard, Maximilian; Brochhagen, Markus; Hopmann, Christian; Böke, Marc; Devi, Anjana; Awakowicz, Peter; Dahlmann, Rainer

    2017-03-01

    Gas transport mechanisms through plastics are usually described by the temperature-dependent Arrhenius-model and compositions of several plastic layers are represented by the CLT. When it comes to thin films such as plasma-enhanced chemical vapour deposition (PE-CVD) or plasma-enhanced atomic layer deposition (PE-ALD) coatings on substrates of polymeric material, a universal model is lacking. While existing models describe diffusion through defects, these models presume that permeation does not occur by other means of transport mechanisms. This paper correlates the existing transport models with data from water vapour transmission experiments.

  6. Strain-Engineering of Giant Pseudo-Magnetic Fields in Graphene/Boron Nitride (BN) Periodic Nanostructures

    NASA Astrophysics Data System (ADS)

    Hsu, Chen-Chih; Wang, Jiaqing; Teague, Marcus; Chen, Chien-Chang; Yeh, Nai-Chang

    2015-03-01

    Ideal graphene is strain-free whereas non-trivial strain can induce pseudo-magnetic fields as predicted theoretically and manifested experimentally. Here we employ nearly strain-free single-domain graphene, grown by plasma-enhanced chemical vapor deposition (PECVD) at low temperatures, to induce controlled strain by placing the PECVD-graphene on substrates containing engineered nanostructures. We fabricate periodic pyramid nanostructures (typically 100 ~ 200 nm laterally and 10 ~ 60 nm in height) on Si substrates by focused ion beam, and determine the topography of these nanostructures using atomic force microscopy and scanning electron microscopy after we transferred monolayer h-BN followed by PECVD-graphene onto these substrates. We find both layers conform well to the nanostructures so that we can control the size, arrangement, separation, and shape of the nanostructures to generate desirable pseudo-magnetic fields. We also employ molecular dynamics simulation to determine the displacement of carbon atoms under a given nanostructure. The pseudo-magnetic field thus obtained is ~150T in the center, relatively homogeneous over 50% of the area, and drops off precipitously near the edge. These findings are extended to arrays of nanostructures and compared with topographic and spectroscopic studies by STM. Supported by NSF.

  7. Plasma Modified Polypropylene Membranes as the Lithium-Ion Battery Separators

    NASA Astrophysics Data System (ADS)

    Wang, Zhengduo; Zhu, Huiqin; Yang, Lizhen; Wang, Xinwei; Liu, Zhongwei; Chen, Qiang

    2016-04-01

    To reduce the thermal shrinkage of the polymeric separators and improve the safety of the Li-ion batteries, plasma treatment and plasma enhanced vapor chemical deposition (PECVD) of SiOx-like are carried out on polypropylene (PP) separators, respectively. Critical parameters for separator properties, such as the thermal shrinkage rate, porosity, wettability, and mechanical strength, are evaluated on the plasma treated PP membranes. O2 plasma treatment is found to remarkably improve the wettability, porosity and electrolyte uptake. PECVD SiOx-like coatings are found to be able to effectively reduce the thermal shrinkage rate of the membranes and increase the ionic conductivity. The electrolyte-philicity of the SiOx-like coating surface can be tuned by the varying O2 content in the gas mixture during the deposition. Though still acceptable, the mechanical strength is reduced after PECVD, which is due to the plasma etching. supported by National Natural Science Foundation of China (Nos. 11175024, 11375031), the Beijing Institute of Graphic and Communication Key Project of China (No. 23190113051), the Shenzhen Science and Technology Innovation Committee of China (No. JCYJ20130329181509637), BJNSFC (No. KZ201510015014), and the State Key Laboratory of Electrical Insulation and Power Equipment of China (No. EIPE15208)

  8. Characterisation and optimisation of PECVD SiNx as an antireflection coating and passivation layer for silicon solar cells

    NASA Astrophysics Data System (ADS)

    Wan, Yimao; McIntosh, Keith R.; Thomson, Andrew F.

    2013-03-01

    In this work, we investigate how the film properties of silicon nitride (SiNx) depend on its deposition conditions when formed by plasma enhanced chemical vapour deposition (PECVD). The examination is conducted with a Roth & Rau AK400 PECVD reactor, where the varied parameters are deposition temperature, pressure, gas flow ratio, total gas flow, microwave plasma power and radio-frequency bias voltage. The films are evaluated by Fourier transform infrared spectroscopy to determine structural properties, by spectrophotometry to determine optical properties, and by capacitance-voltage and photoconductance measurements to determine electronic properties. After reporting on the dependence of SiNx properties on deposition parameters, we determine the optimized deposition conditions that attain low absorption and low recombination. On the basis of SiNx growth models proposed in the literature and of our experimental results, we discuss how each process parameter affects the deposition rate and chemical bond density. We then focus on the effective surface recombination velocity Seff, which is of primary importance to solar cells. We find that for the SiNx prepared in this work, 1) Seff does not correlate universally with the bulk structural and optical properties such as chemical bond densities and refractive index, and 2) Seff depends primarily on the defect density at the SiNx-Si interface rather than the insulator charge. Finally, employing the optimized deposition condition, we achieve a relatively constant and low Seff,UL on low-resistivity (≤1.1 Ωcm) p- and n-type c-Si substrates over a broad range of n = 1.85-4.07. The results of this study demonstrate that the trade-off between optical transmission and surface passivation can be circumvented. Although we focus on photovoltaic applications, this study may be useful for any device for which it is desirable to maximize light transmission and surface passivation.

  9. Synthesis of an ultradense forest of vertically aligned triple-walled carbon nanotubes of uniform diameter and length using hollow catalytic nanoparticles.

    PubMed

    Baliyan, Ankur; Nakajima, Yoshikata; Fukuda, Takahiro; Uchida, Takashi; Hanajiri, Tatsuro; Maekawa, Toru

    2014-01-22

    It still remains a crucial challenge to actively control carbon nanotube (CNT) structure such as the alignment, area density, diameter, length, chirality, and number of walls. Here, we synthesize an ultradense forest of CNTs of a uniform internal diameter by the plasma-enhanced chemical vapor deposition (PECVD) method using hollow nanoparticles (HNPs) modified with ligand as a catalyst. The diameters of the HNPs and internal cavities in the HNPs are uniform. A monolayer of densely packed HNPs is self-assembled on a silicon substrate by spin coating. HNPs shrink via the collapse of the internal cavities and phase transition from iron oxide to metallic iron in hydrogen plasma during the PECVD process. Agglomeration of catalytic NPs is avoided on account of the shrinkage of the NPs and ligand attached to the NPs. Diffusion of NPs into the substrate, which would inactivate the growth of CNTs, is also avoided on account of the ligand. As a result, an ultradense forest of triple-walled CNTs of a uniform internal diameter is successfully synthesized. The area density of the grown CNTs is as high as 0.6 × 10(12) cm(-2). Finally, the activity of the catalytic NPs and the NP/carbon interactions during the growth process of CNTs are investigated and discussed. We believe that the present approach may make a great contribution to the development of an innovative synthetic method for CNTs with selective properties.

  10. Long-Term Stability of Photovoltaic Hybrid Perovskites achieved by Graphene Passivation via a Water- and Polymer-Free Graphene Transfer Method

    NASA Astrophysics Data System (ADS)

    Tseng, W.-S.; Jao, M.-H.; Hsu, C.-C.; Wu, C.-I.; Yeh, N.-C.

    Organic-inorganic hybrid perovskites such as CH3NH3PbX3 (X = I, Br) have been intensively studied in recent years because of their rapidly improving photovoltaic power conversion efficiency. However, severe instability of these materials in ambient environment has been a primary challenge for practical applications. To address this issue, we employ high-quality PECVD-grown graphene to passivate the hybrid perovskites. In contrast to existing processes for transferring graphene from the growth substrates to other surfaces that involve either polymer or water, which are incompatible with photovoltaic applications of these water-sensitive hybrid perovskites, we report here a new water- and polymer-free graphene transferring method. Studies of the Raman, x-ray and ultraviolet photoemission spectroscopy (XPS and UPS) demonstrated excellent quality of monolayer PECVD-grown graphene samples after their transfer onto different substrates with the water- and polymer-free processing method. In particular, graphene was successfully transferred onto the surface of CH3NH3PbI3 thin films with sample quality intact. Moreover, XPS and UPS studies indicated that even after 3 months, the fully graphene-covered perovskite films remained spectroscopically invariant, which was in sharp contrast to the drastic changes, after merely one week, in both the XPS and UPS of a control CH3NH3PbI3 sample without graphene protection. Beckman Inst. in Caltech. Dragon Gate Program in Taiwan.

  11. Transition between 'base' and 'tip' carbon nanofiber growth modes

    NASA Astrophysics Data System (ADS)

    Melechko, Anatoli V.; Merkulov, Vladimir I.; Lowndes, Douglas H.; Guillorn, Michael A.; Simpson, Michael L.

    2002-04-01

    Carbon nanofibers (CNFs) have been synthesized by catalytically controlled dc glow discharge plasma-enhanced chemical vapor deposition (PECVD). Both base-type and tip-type nanofibers have been produced on identical substrates. We have observed a sharp transition between these two growth modes by controlling the kinetics of the growth process without changing the substrate and catalyst materials. This transition is brought about by changing the parameters used in the deposition process such as the flow ratio of the carbonaceous and etchant gasses and others. This study of the initial growth stages as a function of time for both regimes provides a basis for a model of the growth mode transition.

  12. A solid-state nuclear magnetic resonance study of post-plasma reactions in organosilicone microwave plasma-enhanced chemical vapor deposition (PECVD) coatings.

    PubMed

    Hall, Colin J; Ponnusamy, Thirunavukkarasu; Murphy, Peter J; Lindberg, Mats; Antzutkin, Oleg N; Griesser, Hans J

    2014-06-11

    Plasma-polymerized organosilicone coatings can be used to impart abrasion resistance and barrier properties to plastic substrates such as polycarbonate. Coating rates suitable for industrial-scale deposition, up to 100 nm/s, can be achieved through the use of microwave plasma-enhanced chemical vapor deposition (PECVD), with optimal process vapors such as tetramethyldisiloxane (TMDSO) and oxygen. However, it has been found that under certain deposition conditions, such coatings are subject to post-plasma changes; crazing or cracking can occur anytime from days to months after deposition. To understand the cause of the crazing and its dependence on processing plasma parameters, the effects of post-plasma reactions on the chemical bonding structure of coatings deposited with varying TMDSO-to-O2 ratios was studied with (29)Si and (13)C solid-state magic angle spinning nuclear magnetic resonance (MAS NMR) using both single-pulse and cross-polarization techniques. The coatings showed complex chemical compositions significantly altered from the parent monomer. (29)Si MAS NMR spectra revealed four main groups of resonance lines, which correspond to four siloxane moieties (i.e., mono (M), di (D), tri (T), and quaternary (Q)) and how they are bound to oxygen. Quantitative measurements showed that the ratio of TMDSO to oxygen could shift the chemical structure of the coating from 39% to 55% in Q-type bonds and from 28% to 16% for D-type bonds. Post-plasma reactions were found to produce changes in relative intensities of (29)Si resonance lines. The NMR data were complemented by Fourier transform infrared (FTIR) spectroscopy. Together, these techniques have shown that the bonding environment of Si is drastically altered by varying the TMDSO-to-O2 ratio during PECVD, and that post-plasma reactions increase the cross-link density of the silicon-oxygen network. It appears that Si-H and Si-OH chemical groups are the most susceptible to post-plasma reactions. Coatings produced at a low TMDSO-to-oxygen ratio had little to no singly substituted moieties, displayed a highly cross-linked structure, and showed less post-plasma reactions. However, these chemically more stable coatings are less compatible mechanically with plastic substrates, because of their high stiffness.

  13. DC Plasma Synthesis of Vertically Aligned Carbon Nanofibers for Biointerfacing

    NASA Astrophysics Data System (ADS)

    Pearce, Ryan Christopher

    Vertically aligned carbon nanofibers (VACNFs) are a class of materials whose nanoscale dimensions and physical properties makes them uniquely suitable as functional elements in many applications for biodetection and biointerfacing on a cellular level. Control of VACNF synthesis by catalytic plasma enhanced chemical vapor deposition (PECVD) presents many challenges in integration into devices and structures designed for biointerfacing, such as transparent or flexible substrates. This dissertation addresses ways to overcome many of these issues in addition to deepening the fundamental understanding of nano-synthesis in catalytic PECVD. First, a survey of the field of VACNF synthesis and biointerfacing is presented, identifying the present challenges and greatest experimental applications. It is followed by experimental observations that elucidate the underlying mechanism to fiber alignment during synthesis, a critical step for deterministic control of fiber growth. Using a grid of electrodes patterned by photolithography on an insulating substrate, it was found that the alignment of the fibers is controlled by the anisotropic etching provided by ions during dc-PECVD synthesis. The VACNFs that have been utilized for many cellular interfacing experiments have unique mechanical and fluorescent properties due to a SiNx coating. The mechanism for SiNx deposition to VACNF sidewalls during synthesis is explored in addition to a detailed study of the optical properties of the coating. To explain the optical properties of this coating it is proposed that the source of photoluminescence for the SiNx coated VACNFs is quantum confinement effects due to the presence of silicon nanoclusters embedded in a Si3N4 matrix. These luminescent fibers have proven useful as registry markers in cell impalefection studies. To realize VACNF arrays used as an inflatable angioplasty balloon with embedded fibers to deliver drugs across the blood-brain barrier, a method for transferring fibers to flexible polydimethylesiloxane (PDMS) is presented. A process has been developed that involves synthesizing fibers on aluminum, followed by spin coating a thin layer of PDMS and then dissolving the underlying aluminum with KOH. Finally, a method of fiber synthesis using just air and acetone as the process gases is presented, enabling the possibility of inatmosphere, large scale VACNF synthesis. It is envisioned that these advancements should assist the viability of large scale VACNF related technologies and will help to bridge the gap between experimental applications and industrial adoption.

  14. The method of synthesizing of superhydrophobic surfaces by PECVD

    NASA Astrophysics Data System (ADS)

    Orazbayev, Sagi; Gabdullin, Maratbek; Ramazanov, Tlekkabul; Dosbolayev, Merlan; Zhunisbekov, Askar; Omirbekov, Dulat; Otarbay, Zhuldyz

    2018-03-01

    The aim of this work was to obtain superhydrophobic surfaces in a plasma medium. The experiment was carried out using the PECVD method in two different modes: constant and pulsing. The surface roughness was obtained by applying nanoparticles synthesized in plasma in a mixture of argon and methane. The resulting particles were deposited on the surface of silicon and glass materials. The contact angle increased linearly depending on the number of cycles, until it reached 160° at 150-160th cycles, after that the increase in cycles does not affect the contact angle, since the saturation process is in progress. Also the effect of the working gas composition on the hydrophobicity of the surface was studied. At low concentrations of methane (1%) only particles are synthesized in the working gas, and hydrophobicity is unstable, with an increase in methane concentration (7%) nanofilms are synthesized from nanoclusters, and surface hydrophobicity is relatively stable. In addition, a pulsing plasma mode was used to obtain superhydrophobic surfaces. The hydrophobicity of the sample showed that the strength of the nanofilm was stable in comparison with the sample obtained in the first mode, but the contact angle was lower. The obtained samples were examined using SEM, SPM, optical analysis, and their contact angles were determined.

  15. Confirming the key role of Ar+ ion bombardment in the growth feature of nanostructured carbon materials by PECVD

    NASA Astrophysics Data System (ADS)

    Liu, Yulin; Lin, Jinghuang; Jia, Henan; Chen, Shulin; Qi, Junlei; Qu, Chaoqun; Cao, Jian; Feng, Jicai; Fei, Weidong

    2017-11-01

    In order to confirm the key role of Ar+ ion bombardment in the growth feature of nanostructured carbon materials (NCMs), here we report a novel strategy to create different Ar+ ion states in situ in plasma enhanced chemical vapor deposition (PECVD) by separating catalyst film from the substrate. Different bombardment environments on either side of the catalyst film were created simultaneously to achieve multi-layered structural NCMs. Results showed that Ar+ ion bombardment is crucial and complex for the growth of NCMs. Firstly, Ar+ ion bombardment has both positive and negative effects on carbon nanotubes (CNTs). On one hand, Ar+ ions can break up the graphic structure of CNTs and suppress thin CNT nucleation and growth. On the other hand, Ar+ ion bombardment can remove redundant carbon layers on the surface of large catalyst particles which is essential for thick CNTs. As a result, the diameter of the CNTs depends on the Ar+ ion state. As for vertically oriented few-layer graphene (VFG), Ar+ ions are essential and can even convert the CNTs into VFG. Therefore, by combining with the catalyst separation method, specific or multi-layered structural NCMs can be obtained by PECVD only by changing the intensity of Ar+ ion bombardment, and these special NCMs are promising in many fields.

  16. High Efficiency Narrow Gap and Tandem Junction Devices: Final Technical Report, 1 May 2002--31 October 2004

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Madan, A

    2005-03-01

    The work described in this report uses a modified pulsed plasma-enhanced chemical vapor deposition (PECVD) technique that has been successfully developed to fabricate state-of-the-art nc-Si materials and devices. Specifically, we have achieved the following benchmarks: nc SiH device with an efficiency of 8% achieved at a deposition rate of {approx}1 A/s; nc SiH device with an efficiency of 7% achieved at a deposition rate of {approx}5 A/s; large-area technology developed using pulsed PECVD with uniformity of +/-5% over 25 cm x 35 cm; devices have been fabricated in the large-area system (part of Phase 3); an innovative stable four-terminal (4-T)more » tandem-junction device of h> 9% fabricated. (Note that the 4-T device was fabricated with existing technology base and with further development can reach stabilized h of 12%); and with improvement in Voc {approx} 650 mV, from the current value of 480 mV can lead to stable 4-T device with h>16%. Toward this objective, modified pulsed PECVD was developed where layer- by-layer modification of nc-SiH has been achieved. (Note that due to budget cuts at NREL, this project was curtailed by about one year.)« less

  17. Evolution of a Native Oxide Layer at the a-Si:H/c-Si Interface and Its Influence on a Silicon Heterojunction Solar Cell.

    PubMed

    Liu, Wenzhu; Meng, Fanying; Zhang, Xiaoyu; Liu, Zhengxin

    2015-12-09

    The interface microstructure of a silicon heterojunction (SHJ) solar cell was investigated. We found an ultrathin native oxide layer (NOL) with a thickness of several angstroms was formed on the crystalline silicon (c-Si) surface in a very short time (∼30 s) after being etched by HF solution. Although the NOL had a loose structure with defects that are detrimental for surface passivation, it acted as a barrier to restrain the epitaxial growth of hydrogenated amorphous silicon (a-Si:H) during the plasma-enhanced chemical vapor deposition (PECVD). The microstructure change of the NOL during the PECVD deposition of a-Si:H layers with different conditions and under different H2 plasma treatments were systemically investigated in detail. When a brief H2 plasma was applied to treat the a-Si:H layer after the PECVD deposition, interstitial oxygen and small-size SiO2 precipitates were transformed to hydrogenated amorphous silicon suboxide alloy (a-SiO(x):H, x ∼ 1.5). In the meantime, the interface defect density was reduced by about 50%, and the parameters of the SHJ solar cell were improved due to the post H2 plasma treatment.

  18. Low temperature synthesis of silicon nitride thin films deposited by VHF/RF PECVD for gas barrier application

    NASA Astrophysics Data System (ADS)

    Lee, Jun S.; Shin, Kyung S.; Sahu, B. B.; Han, Jeon G.

    2015-09-01

    In this work, silicon nitride (SiNx) thin films were deposited on polyethylene terephthalate (PET) substrates as barrier layers by plasma enhanced chemical vapor deposition (PECVD) system. Utilizing a combination of very high-frequency (VHF 40.68 MHz) and radio-frequency (RF 13.56 MHz) plasmas it was possible to adopt PECVD deposition at low-temperature using the precursors: Hexamethyldisilazane (HMDSN) and nitrogen. To investigate relationship between film properties and plasma properties, plasma diagnostic using optical emission spectroscopy (OES) was performed along with the film analysis using Fourier transform infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS). OES measurements show that there is dominance of the excited N2 and N2+ emissions with increase in N2 dilution, which has a significant impact on the film properties. It was seen that all the deposited films contains mainly silicon nitride with a small content of carbon and no signature of oxygen. Interestingly, upon air exposure, films have shown the formation of Si-O bonds in addition to the Si-N bonds. Measurements and analysis reveals that SiNx films deposited with high content of nitrogen with HMDSN plasma can have lower gas barrier properties as low as 7 . 3 ×10-3 g/m2/day. Also at Chiang Mai University.

  19. Confirming the key role of Ar+ ion bombardment in the growth feature of nanostructured carbon materials by PECVD.

    PubMed

    Liu, Yulin; Lin, Jinghuang; Jia, Henan; Chen, Shulin; Qi, Junlei; Qu, Chaoqun; Cao, Jian; Feng, Jicai; Fei, Weidong

    2017-11-24

    In order to confirm the key role of Ar + ion bombardment in the growth feature of nanostructured carbon materials (NCMs), here we report a novel strategy to create different Ar + ion states in situ in plasma enhanced chemical vapor deposition (PECVD) by separating catalyst film from the substrate. Different bombardment environments on either side of the catalyst film were created simultaneously to achieve multi-layered structural NCMs. Results showed that Ar + ion bombardment is crucial and complex for the growth of NCMs. Firstly, Ar + ion bombardment has both positive and negative effects on carbon nanotubes (CNTs). On one hand, Ar + ions can break up the graphic structure of CNTs and suppress thin CNT nucleation and growth. On the other hand, Ar + ion bombardment can remove redundant carbon layers on the surface of large catalyst particles which is essential for thick CNTs. As a result, the diameter of the CNTs depends on the Ar + ion state. As for vertically oriented few-layer graphene (VFG), Ar + ions are essential and can even convert the CNTs into VFG. Therefore, by combining with the catalyst separation method, specific or multi-layered structural NCMs can be obtained by PECVD only by changing the intensity of Ar + ion bombardment, and these special NCMs are promising in many fields.

  20. Revetements antireflet-passivation a base de nitrure de silicium PECVD pour cellules solaires triple-jonction III-V/ Ge

    NASA Astrophysics Data System (ADS)

    Homier, Ram

    Dans le contexte environnemental actuel, le photovoltaïque bénéficie de l'augmentation des efforts de recherche dans le domaine des énergies renouvelables. Pour réduire le coût de la production d'électricité par conversion directe de l'énergie lumineuse en électricité, le photovoltaïque concentré est intéressant. Le principe est de concentrer une grande quantité d'énergie lumineuse sur des petites surfaces de cellules solaires multi-jonction à haute efficacité. Lors de la fabrication d'une cellule solaire, il est essentiel d'inclure une méthode pour réduire la réflexion de la lumière à la surface du dispositif. Le design d'un revêtement antireflet (ARC) pour cellules solaires multi-jonction présente des défis à cause de la large bande d'absorption et du besoin d'égaliser le courant produit par chaque sous-cellule. Le nitrure de silicium déposé par PECVD en utilisant des conditions standards est largement utilisé dans l'industrie des cellules solaires à base de silicium. Cependant, ce diélectrique présente de l'absorption dans la plage des courtes longueurs d'onde. Nous proposons l'utilisation du nitrure de silicium déposé par PECVD basse fréquence (LFSiN) optimisé pour avoir un haut indice de réfraction et une faible absorption optique pour l'ARC pour cellules solaires triple-jonction III-V/Ge. Ce matériau peut aussi servir de couche de passivation/encapsulation. Les simulations montrent que l'ARC double couche SiO2/LFSiN peut être très efficace pour réduire les pertes par réflexion dans la plage de longueurs d'onde de la sous-cellule limitante autant pour des cellules solaires triple-jonction limitées par la sous-cellule du haut que pour celles limitées par la sous-cellule du milieu. Nous démontrons aussi que la performance de la structure est robuste par rapport aux fluctuations des paramètres des couches PECVD (épaisseurs, indice de réfraction). Mots-clés : Photovoltaïque concentré (CPV), cellules solaires multi-jonction (MJSC), revêtement antireflet (ARC), passivation des semiconducteurs III-V, nitrure de silicium (Si"Ny), PECVD.

  1. Polymeric Packaging for Fully Implantable Wireless Neural Microsensors

    PubMed Central

    Aceros, Juan; Yin, Ming; Borton, David A.; Patterson, William R.; Bull, Christopher; Nurmikko, Arto V.

    2014-01-01

    We present polymeric packaging methods used for subcutaneous, fully implantable, broadband, and wireless neurosensors. A new tool for accelerated testing and characterization of biocompatible polymeric packaging materials and processes is described along with specialized test units to simulate our fully implantable neurosensor components, materials and fabrication processes. A brief description of the implantable systems is presented along with their current encapsulation methods based on polydimethylsiloxane (PDMS). Results from in-vivo testing of multiple implanted neurosensors in swine and non-human primates are presented. Finally, a novel augmenting polymer thin film material to complement the currently employed PDMS is introduced. This thin layer coating material is based on the Plasma Enhanced Chemical Vapor Deposition (PECVD) process of Hexamethyldisiloxane (HMDSO) and Oxygen (O2). PMID:23365999

  2. Structural properties of a-Si films and their effect on aluminum induced crystallization

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Tankut, Aydin; Ozkol, Engin; Karaman, Mehmet

    2015-10-15

    In this paper, we report the influence of the structural properties of amorphous silicon (a-Si) on its subsequent crystallization behavior via the aluminum induced crystallization (AIC) method. Two distinct a-Si deposition techniques, electron beam evaporation and plasma enhanced chemical vapor deposition (PECVD), are compared for their effect on the overall AIC kinetics as well as the properties of the final poly-crystalline (poly-Si) silicon film. Raman and FTIR spectroscopy results indicate that the PECVD grown a-Si films has higher intermediate-range order, which is enhanced for increased hydrogen dilution during deposition. With increasing intermediate-range order of the a-Si, the rate of AICmore » is diminished, leading larger poly-Si grain size.« less

  3. On a non-thermal atmospheric pressure plasma jet used for the deposition of silicon-organic films

    NASA Astrophysics Data System (ADS)

    Schäfer, Jan; Sigeneger, Florian; Foest, Rüdiger; Loffhagen, Detlef; Weltmann, Klaus-Dieter

    2018-05-01

    This work represents a concise overview on the results achieved by the authors over the last years on the plasma of a non-thermal reactive plasma jet at atmospheric pressure and of related thin film formation by plasma enhanced chemical vapour deposition (PECVD). The source was developed considering the application of the plasma self-organization for PECVD. The experimental methods comprise spectroscopic measurements of plasma parameters in the active zone, temperature measurements in the active zone and the effluent as well as the analysis of deposited films at the substrate surface. The theoretical investigations are devoted to a single filament in the active zone using a phase-resolved model and to an overall description of the jet including the substrate using a period-averaged model.

  4. A novel method for accurate patterning and positioning of biological cells

    NASA Astrophysics Data System (ADS)

    Jing, Gaoshan; Labukas, Joseph P.; Iqbal, Aziz; Perry, Susan Fueshko; Ferguson, Gregory S.; Tatic-Lucic, Svetlana

    2007-05-01

    The ability to anchor cells in predefined patterns on a surface has become very important for the development of cell-based sensors, tissue-engineering applications, and the understanding of basic cell functions. Currently, the most widely used technique to generate micrometer or sub-micrometer-sized patterns for various biological applications is microcontact printing (μCP). However, the fidelity of the final pattern may be compromised by deformation of the PDMS stamps used during printing. A novel technique for accurately patterning and positioning biological cells is presented, which can overcome this obstacle. We have fabricated a chip on a silicon wafer using standard photolithographic and deposition processes consisting of gold patterns on top of PECVD silicon dioxide. A hydrophobic self-assembled monolayer (SAM) derived from 1-hexadecanethiol (HDT) was coated on the gold surface to prevent cell growth, and a hydrophilic SAM derived from (3-trimethoxysilyl propyl)-diethylenetriamine (DETA) was coated on the exposed PECVD silicon dioxide surface to promote cell growth. Immortalized mouse hypothalamic neurons (GT1-7) were cultured in vitro on the chip, and patterned cells were fluorescently stained and visualized by fluorescence microscopy. By our method, hydrophobic and hydrophilic regions can be reliably generated and easily visualized under a microscope prior to cell culturing. Cell growth was precisely controlled and limited to specific areas. The achieved resolution was 2 microns, and it could be improved with high resolution photolithographic methods.

  5. High rate chemical vapor deposition of carbon films using fluorinated gases

    DOEpatents

    Stafford, Byron L.; Tracy, C. Edwin; Benson, David K.; Nelson, Arthur J.

    1993-01-01

    A high rate, low-temperature deposition of amorphous carbon films is produced by PE-CVD in the presence of a fluorinated or other halide gas. The deposition can be performed at less than 100.degree. C., including ambient room temperature, with a radio frequency plasma assisted chemical vapor deposition process. With less than 6.5 atomic percent fluorine incorporated into the amorphous carbon film, the characteristics of the carbon film, including index of refraction, mass density, optical clarity, and chemical resistance are within fifteen percent (15%) of those characteristics for pure amorphous carbon films, but the deposition rates are high.

  6. Room temperature deposition of silicon nanodot clusters by plasma-enhanced chemical vapor deposition.

    PubMed

    Kim, Jae-Kwan; Kim, Jun Young; Yoon, Jae-Sik; Lee, Ji-Myon

    2013-10-01

    The formation of nanometer-scale (ns)-Si dots and clusters on p-GaN layers has been studied by controlling the early stage of growth during plasma-enhanced chemical vapor deposition (PECVD) at room temperature. We found that ns-Si dots and clusters formed on the p-GaN surface, indicating that growth was the Volmer-Weber mode. The deposition parameters such as radio frequency (RF) power and processing time mainly influenced the size of the ns-Si dots (40 nm-160 nm) and the density of the ns-Si dot clusters.

  7. Growing Aligned Carbon Nanotubes for Interconnections in ICs

    NASA Technical Reports Server (NTRS)

    Li, Jun; Ye, Qi; Cassell, Alan; Ng, Hou Tee; Stevens, Ramsey; Han, Jie; Meyyappan, M.

    2005-01-01

    A process for growing multiwalled carbon nanotubes anchored at specified locations and aligned along specified directions has been invented. Typically, one would grow a number of the nanotubes oriented perpendicularly to a silicon integrated-circuit (IC) substrate, starting from (and anchored on) patterned catalytic spots on the substrate. Such arrays of perpendicular carbon nanotubes could be used as electrical interconnections between levels of multilevel ICs. The process (see Figure 1) begins with the formation of a layer, a few hundred nanometers thick, of a compatible electrically insulating material (e.g., SiO(x) or Si(y)N(z) on the silicon substrate. A patterned film of a suitable electrical conductor (Al, Mo, Cr, Ti, Ta, Pt, Ir, or doped Si), having a thickness between 1 nm and 2 m, is deposited on the insulating layer to form the IC conductor pattern. Next, a catalytic material (usually, Ni, Fe, or Co) is deposited to a thickness between 1 and 30 nm on the spots from which it is desired to grow carbon nanotubes. The carbon nanotubes are grown by plasma-enhanced chemical vapor deposition (PECVD). Unlike the matted and tangled carbon nanotubes grown by thermal CVD, the carbon nanotubes grown by PECVD are perpendicular and freestanding because an electric field perpendicular to the substrate is used in PECVD. Next, the free space between the carbon nanotubes is filled with SiO2 by means of CVD from tetraethylorthosilicate (TEOS), thereby forming an array of carbon nanotubes embedded in SiO2. Chemical mechanical polishing (CMP) is then performed to remove excess SiO2 and form a flat-top surface in which the outer ends of the carbon nanotubes are exposed. Optionally, depending on the application, metal lines to connect selected ends of carbon nanotubes may be deposited on the top surface. The top part of Figure 2 is a scanning electron micrograph (SEM) of carbon nanotubes grown, as described above, on catalytic spots of about 100 nm diameter patterned by electron-beam lithography. These and other nanotubes were found to have lengths ranging from 2 to 10 m and diameters ranging from 30 to 200 nm, the exact values of length depending on growth times and conditions and the exact values of diameter depending on the diameters and thicknesses of the catalyst spots. The bottom part of Figure 2 is an SEM of an embedded array of carbon nanotubes after CMP.

  8. Area laser crystallized LTPS TFTs with implanted contacts for active matrix OLED displays

    NASA Astrophysics Data System (ADS)

    Persidis, Efstathios; Baur, Holger; Pieralisi, Fabio; Schalberger, Patrick; Fruehauf, Norbert

    2008-03-01

    We have developed a four mask low temperature poly-Si (LTPS) TFT process for p- and n-channel devices. Our PECVD deposited amorphous silicon is recrystallized to polycrystalline silicon with single area excimer laser crystallization while formation of drain and source is carried out with self aligned ion beam implantation. We have investigated implantation parameters, suitability of various metallizations as well as laser activation and annealing procedures. To prove the potential capability of our devices, which are suitable for conventional and inverted OLEDs alike, we have produced several functional active matrix backplanes implementing different pixel circuits. Our active matrix backplane process has been customized to drive small molecules as well as polymers, regardless if top or bottom emitting.

  9. Perspectives on the Growth of High Edge Density Carbon Nanostructures: Transitions from Vertically Oriented Graphene Nanosheets to Graphenated Carbon Nanotubes

    PubMed Central

    2015-01-01

    Insights into the growth of high edge density carbon nanostructures were achieved by a systematic parametric study of plasma-enhanced chemical vapor deposition (PECVD). Such structures are important for electrode performance in a variety of applications such as supercapacitors, neural stimulation, and electrocatalysis. A morphological trend was observed as a function of temperature whereby graphenated carbon nanotubes (g-CNTs) emerged as an intermediate structure between carbon nanotubes (CNTs) at lower temperatures and vertically oriented carbon nanosheets (CNS), composed of few-layered graphene, at higher temperatures. This is the first time that three distinct morphologies and dimensionalities of carbon nanostructures (i.e., 1D CNTs, 2D CNSs, and 3D g-CNTs) have been synthesized in the same reaction chamber by varying only a single parameter (temperature). A design of experiments (DOE) approach was utilized to understand the range of growth permitted in a microwave PECVD reactor, with a focus on identifying graphenated carbon nanotube growth within the process space. Factors studied in the experimental design included temperature, gas ratio, catalyst thickness, pretreatment time, and deposition time. This procedure facilitates predicting and modeling high edge density carbon nanostructure characteristics under a complete range of growth conditions that yields various morphologies of nanoscale carbon. Aside from the morphological trends influenced by temperature, a relationship between deposition temperature and specific capacitance emerged from the DOE study. Transmission electron microscopy was also used to understand the morphology and microstructure of the various high edge density structures. From these results, a new graphene foliate formation mechanism is proposed for synthesis of g-CNTs in a single deposition process. PMID:25089165

  10. Morphology and Structural Characterization of Carbon Nanowalls Grown via VHF-PECVD

    NASA Astrophysics Data System (ADS)

    Akmal Hasanudin, M.; Wahab, Y.; Ismail, A. K.; Zahid Jamal, Z. A.

    2018-03-01

    A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of methane and hydrogen. Morphology and structural properties of the grown nanostructure were investigated by FESEM imaging and Raman spectroscopy. Carbon nanowalls (CNW) with dense and wavy-like structure were successfully synthesized. The wavy-like morphology of CNW was found to be more distinct during growth at small electrode spacing and denser with increasing deposition time due to better flux of hydrocarbon radicals to the substrate and higher rate of reaction, respectively. Typical characteristics of CNW were observed from strong D band, narrow bandwidth of G band and single broad peak of 2D band of Raman spectra indicating the presence of disordered nanocrystalline graphite structure with high degree of graphitization.

  11. SEMICONDUCTOR TECHNOLOGY Development of spin-on-glass process for triple metal interconnects

    NASA Astrophysics Data System (ADS)

    Li, Peng; Wenbin, Zhao; Guozhang, Wang; Zongguang, Yu

    2010-12-01

    Spin-on-glass (SOG), an interlayer dielectric material applied in liquid form to fill narrow gaps in the sub-dielectric surface and thus conducive to planarization, is an alternative to silicon dioxide (SiO2) deposited using PECVD processes. However, its inability to adhere to metal and problems such as cracking prevent the easy application of SOG technology to provide an interlayer dielectric in multilevel metal interconnect circuits, particularly in university processing labs. This paper will show that a thin layer of CVD SiO2 and a curing temperature below the sintering temperature of the metal interconnect layer will promote adhesion, reduce gaps, and prevent cracking. Electron scanning microscope analysis has been used to demonstrate the success of the improved technique. This optimized process has been used in batches of double-poly, triple-metal CMOS wafer fabrication to date.

  12. Deposition of dopant impurities and pulsed energy drive-in

    DOEpatents

    Wickboldt, Paul; Carey, Paul G.; Smith, Patrick M.; Ellingboe, Albert R.

    2008-01-01

    A semiconductor doping process which enhances the dopant incorporation achievable using the Gas Immersion Laser Doping (GILD) technique. The enhanced doping is achieved by first depositing a thin layer of dopant atoms on a semiconductor surface followed by exposure to one or more pulses from either a laser or an ion-beam which melt a portion of the semiconductor to a desired depth, thus causing the dopant atoms to be incorporated into the molten region. After the molten region recrystallizes the dopant atoms are electrically active. The dopant atoms are deposited by plasma enhanced chemical vapor deposition (PECVD) or other known deposition techniques.

  13. Deposition of dopant impurities and pulsed energy drive-in

    DOEpatents

    Wickboldt, Paul; Carey, Paul G.; Smith, Patrick M.; Ellingboe, Albert R.

    1999-01-01

    A semiconductor doping process which enhances the dopant incorporation achievable using the Gas Immersion Laser Doping (GILD) technique. The enhanced doping is achieved by first depositing a thin layer of dopant atoms on a semiconductor surface followed by exposure to one or more pulses from either a laser or an ion-beam which melt a portion of the semiconductor to a desired depth, thus causing the dopant atoms to be incorporated into the molten region. After the molten region recrystallizes the dopant atoms are electrically active. The dopant atoms are deposited by plasma enhanced chemical vapor deposition (PECVD) or other known deposition techniques.

  14. Deposition of dopant impurities and pulsed energy drive-in

    DOEpatents

    Wickboldt, P.; Carey, P.G.; Smith, P.M.; Ellingboe, A.R.

    1999-06-29

    A semiconductor doping process which enhances the dopant incorporation achievable using the Gas Immersion Laser Doping (GILD) technique is disclosed. The enhanced doping is achieved by first depositing a thin layer of dopant atoms on a semiconductor surface followed by exposure to one or more pulses from either a laser or an ion-beam which melt a portion of the semiconductor to a desired depth, thus causing the dopant atoms to be incorporated into the molten region. After the molten region recrystallizes the dopant atoms are electrically active. The dopant atoms are deposited by plasma enhanced chemical vapor deposition (PECVD) or other known deposition techniques. 2 figs.

  15. Deposition of hard elastic hydrogenated fullerenelike carbon films

    NASA Astrophysics Data System (ADS)

    Wang, Zhou; Zhang, Junyan

    2011-05-01

    Hydrogenated fullerenelike carbon (H-FLC) films, with high hardness of 41.7 ± 1.4 GPa and elastic recovery of ˜75.1%, have been uniformly deposited at low temperature by pulse direct current plasma enhanced chemical vapor deposition (pulse DC PECVD). The superior mechanical properties of the H-FLC films are attributed to the unique curvature and interconnection of graphitic basal planes. We propose the fullerenelike structures are formed in the far nonequilibrium pulse plasma environment and stabilized in the sequential fast quenching process. It is expected that the facile deposition of H-FLC films will promote the large-scale low-temperature preparation of engineering protective films for industrial applications.

  16. On the origin of emission and thermal quenching of SRSO:Er3+ films grown by ECR-PECVD

    PubMed Central

    2013-01-01

    Silicon nanocrystals embedded in a silicon-rich silicon oxide matrix doped with Er3+ ions have been fabricated by electron cyclotron resonance plasma-enhanced chemical vapor deposition. Indirect excitation of erbium photoluminescence via silicon nanocrystals has been investigated. Temperature quenching of the photoluminescence originating from the silicon nanocrystals and the erbium ions has been observed. Activation energies of the thermally activated quenching process were estimated for different excitation wavelengths. The temperature quenching mechanism of the emission is discussed. Also, the origin of visible emission and kinetic properties of Er-related emission have been discussed in details. PMID:23433189

  17. Vertically aligned carbon nanotube emitter on metal foil for medical X-ray imaging.

    PubMed

    Ryu, Je Hwang; Kim, Wan Sun; Lee, Seung Ho; Eom, Young Ju; Park, Hun Kuk; Park, Kyu Chang

    2013-10-01

    A simple method is proposed for growing vertically aligned carbon nanotubes on metal foil using the triode direct current plasma-enhanced chemical vapor deposition (PECVD). The carbon nanotube (CNT) electron emitter was fabricated using fewer process steps with an acid treated metal substrate. The CNT emitter was used for X-ray generation, and the X-ray image of mouse's joint was obtained with an anode current of 0.5 mA at an anode bias of 60 kV. The simple fabrication of a well-aligned CNT with a protection layer on metal foil, and its X-ray application, were studied.

  18. Progress with polycrystalline silicon thin-film solar cells on glass at UNSW

    NASA Astrophysics Data System (ADS)

    Aberle, Armin G.

    2006-01-01

    Polycrystalline Si (pc-Si) thin-film solar cells on glass have long been considered a very promising approach for lowering the cost of photovoltaic (PV) solar electricity. In recent years there have been dramatic advances with this PV technology, and the first commercial modules (CSG Solar) are expected to hit the marketplace in 2006. The CSG modules are based on solid-phase crystallisation of plasma-enhanced chemical vapor deposition (PECVD) -deposited amorphous Si. Independent research in the author's group at the University of New South Wales (UNSW) during recent years has led to the development of three alternative pc-Si thin-film solar cells on glass—EVA, ALICIA and ALICE. Cell thickness is generally about 2 μm. The first two cells are made by vacuum evaporation, whereas ALICE cells can be made by either vacuum evaporation or PECVD. Evaporation has the advantage of being a fast and inexpensive Si deposition method. A crucial component of ALICIA and ALICE cells is a seed layer made on glass by metal-induced crystallisation of amorphous silicon (a-Si). The absorber layer of these cells is made by either ion-assisted Si epitaxy (ALICIA) or solid-phase epitaxy of a-Si (ALICE). This paper reports on the status of these three new thin-film PV technologies. All three solar cells seem to be capable of voltages of over 500 mV and, owing to their potentially inexpensive and scalable fabrication process, have significant industrial appeal.

  19. Two different ways for waveguides and optoelectronics components on top of C-MOS

    NASA Astrophysics Data System (ADS)

    Fedeli, J. M.; Jeannot, S.; Kostrzewa, M.; Di Cioccio, L.; Jousseaume, V.; Orobtchouk, R.; Maury, P.; Zussy, M.

    2006-02-01

    While fabrication of photonic components at the wafer level is a long standing goal of integrated optics, new applications such as optical interconnects are introducing new challenges for waveguides and optoelectronic component fabrication. Indeed, global interconnects are expected to face severe limitations in the near future. To face this problem, optical links on top of a CMOS circuits could be an alternative. The critical points to perform an optical link on a chip are firstly the realization of compact passive optical distribution and secondly the report of optoelectronic components for the sources and detectors. This paper presents two different approaches for the integration of both waveguides and optoelectronic components. In a first "total bonding" approach, waveguides have been elaborated using classical "Silicon On Insulators" technology and then reported using molecular bonding on top off Si wafers. The S0I substrate was then chemically etched, after what InP dies were moleculary bonded on top of the waveguides. With this approach, optical components with low loses and a good equilibrium are demonsrated. Using molecular bonding, InP dies were reported with no degradation of the optoelectronic properties of the films. In a second approach, using PECVD silicon nitride or amorphous silicon coupled to PECVD silicon oxide, basic optical components are demonstrated. This low temperature technology is compatible with a microelectronic Back End process, allowing an integration of the waveguides directly on top of CMOS circuits. InP dies can then be bonded on top of the waveguides.

  20. Formation of nanocrystalline diamond in polymer like carbon films deposited by plasma CVD.

    PubMed

    Bhaduri, A; Chaudhuri, P

    2009-09-01

    Conventional plasma enhanced chemical vapour deposition (PECVD) method is generally not suitable for the growth of nanocrystalline diamond (NCD) films. However, our study shows that conditions favourable for powder formation help to grow large amount of nanocrystallites in conventional PECVD. With CH4 as the carbon source gas, dilution with Ar and moderate (50 W) rf power enhances formations of powders (nanoparticles) and C2 dimers within the plasma. On the other hand, with pure CH4 or with hydrogen diluted CH4, powder formation as also NCD growth is hindered. It is proposed that the nanoparticles formed in the plasma act as the "islands" while the C2 dimers are the "seeds" for the NCD growth. The structure of the films deposited on the grounded anode under different conditions of dilution has been studied. It is observed that with high Ar dilution the films contain NCD embedded in polymer like carbon (PLC) matrix.

  1. Surface wet-ability modification of thin PECVD silicon nitride layers by 40 keV argon ion treatments

    NASA Astrophysics Data System (ADS)

    Caridi, F.; Picciotto, A.; Vanzetti, L.; Iacob, E.; Scolaro, C.

    2015-10-01

    Measurements of wet-ability of liquid drops have been performed on a 30 nm silicon nitride (Si3N4) film deposited by a PECVD reactor on a silicon wafer and implanted by 40 keV argon ions at different doses. Surface treatments by using Ar ion beams have been employed to modify the wet-ability. The chemical composition of the first Si3N4 monolayer was investigated by means of X-ray Photoelectron Spectroscopy (XPS). The surface morphology was tested by Atomic Force Microscopy (AFM). Results put in evidence the best implantation conditions for silicon nitride to increase or to reduce the wet-ability of the biological liquid. This permits to improve the biocompatibility and functionality of Si3N4. In particular experimental results show that argon ion bombardment increases the contact angle, enhances the oxygen content and increases the surface roughness.

  2. Enhanced stability of Cu-BTC MOF via perfluorohexane plasma-enhanced chemical vapor deposition.

    PubMed

    Decoste, Jared B; Peterson, Gregory W; Smith, Martin W; Stone, Corinne A; Willis, Colin R

    2012-01-25

    Metal organic frameworks (MOFs) are a leading class of porous materials for a wide variety of applications, but many of them have been shown to be unstable toward water. Cu-BTC (1,3,5 benzenetricarboxylic acid, BTC) was treated with a plasma-enhanced chemical vapor deposition (PECVD) of perfluorohexane creating a hydrophobic form of Cu-BTC. It was found that the treated Cu-BTC could withstand high humidity and even submersion in water much better than unperturbed Cu-BTC. Through Monte Carlo simulations it was found that perfluorohexane sites itself in such a way within Cu-BTC as to prevent the formation of water clusters, hence preventing the decomposition of Cu-BTC by water. This PECVD of perfluorohexane could be exploited to widen the scope of practical applications of Cu-BTC and other MOFs. © 2012 American Chemical Society

  3. CROSS-DISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY: Research on the boron contamination at the p/i interface of microcrystalline silicon solar cells deposited in a single PECVD chamber

    NASA Astrophysics Data System (ADS)

    Zhang, Xiao-Dan; Sun, Fu-He; Wei, Chang-Chun; Sun, Jian; Zhang, De-Kun; Geng, Xin-Hua; Xiong, Shao-Zhen; Zhao, Ying

    2009-10-01

    This paper studies boron contamination at the interface between the p and i layers of μc-Si:H solar cells deposited in a single-chamber PECVD system. The boron depth profile in the i layer was measured by Secondary Ion Mass Spectroscopy. It is found that the mixed-phase μc-Si:H materials with 40% crystalline volume fraction is easy to be affected by the residual boron in the reactor. The experimental results showed that a 500-nm thick μc-Si:H covering layer or a 30-seconds of hydrogen plasma treatment can effectively reduce the boron contamination at the p/i interface. However, from viewpoint of cost reduction, the hydrogen plasma treatment is desirable for solar cell manufacture because the substrate is not moved during the hydrogen plasma treatment.

  4. High-density plasma deposition manufacturing productivity improvement

    NASA Astrophysics Data System (ADS)

    Olmer, Leonard J.; Hudson, Chris P.

    1999-09-01

    High Density Plasma (HDP) deposition provides a means to deposit high quality dielectrics meeting submicron gap fill requirements. But, compared to traditional PECVD processing, HDP is relatively expensive due to the higher capital cost of the equipment. In order to keep processing costs low, it became necessary to maximize the wafer throughput of HDP processing without degrading the film properties. The approach taken was to optimize the post deposition microwave in-situ clean efficiency. A regression model, based on actual data, indicated that number of wafers processed before a chamber clean was the dominant factor. Furthermore, a design change in the ceramic hardware, surrounding the electrostatic chuck, provided thermal isolation resulting in an enhanced clean rate of the chamber process kit. An infra-red detector located in the chamber exhaust line provided a means to endpoint the clean and in-film particle data confirmed the infra-red results. The combination of increased chamber clean frequency, optimized clean time and improved process.

  5. Thermo-optically tunable thin film devices

    NASA Astrophysics Data System (ADS)

    Domash, Lawrence H.

    2003-10-01

    We report advances in tunable thin film technology and demonstration of multi-cavity tunable filters. Thin film interference coatings are the most widely used optical technology for telecom filtering, but until recently no tunable versions have been known except for mechanically rotated filters. We describe a new approach to broadly tunable components based on the properties of semiconductor thin films with large thermo-optic coefficients. The technology is based on amorphous silicon deposited by plasma-enhanced chemical vapor deposition (PECVD), a process adapted for telecom applications from its origins in the flat-panel display and solar cell industries. Unlike MEMS devices, tunable thin films can be constructed in sophisticated multi-cavity, multi-layer optical designs.

  6. Performance and Stability Enhancement of In-Sn-Zn-O TFTs Using SiO2 Gate Dielectrics Grown by Low Temperature Atomic Layer Deposition.

    PubMed

    Sheng, Jiazhen; Han, Ju-Hwan; Choi, Wan-Ho; Park, Jozeph; Park, Jin-Seong

    2017-12-13

    Silicon dioxide (SiO 2 ) films were synthesized by plasma-enhanced atomic layer deposition (PEALD) using BTBAS [bis(tertiarybutylamino) silane] as the precursor and O 2 plasma as the reactant, at a temperature range from 50 to 200 °C. While dielectric constant values larger than 3.7 are obtained at all deposition temperatures, the leakage current levels are drastically reduced to below 10 -12 A at temperatures above 150 °C, which are similar to those obtained in thermally oxidized and PECVD grown SiO 2 . Thin film transistors (TFTs) based on In-Sn-Zn-O (ITZO) semiconductors were fabricated using thermal SiO 2 , PECVD SiO 2 , and PEALD SiO 2 grown at 150 °C as the gate dielectrics, and superior device performance and stability are observed in the last case. A linear field effect mobility of 68.5 cm 2 /(V s) and a net threshold voltage shift (ΔV th ) of approximately 1.2 V under positive bias stress (PBS) are obtained using the PEALD SiO 2 as the gate insulator. The relatively high concentration of hydrogen in the PEALD SiO 2 is suggested to induce a high carrier density in the ITZO layer deposited onto it, which results in enhanced charge transport properties. Also, it is most likely that the hydrogen atoms have passivated the electron traps related to interstitial oxygen defects, thus resulting in improved stability under PBS. Although the PECVD SiO 2 contains a hydrogen concentration similar to that of PEALD SiO 2 , its relatively large surface roughness appears to induce scattering effects and the generation of electron traps, which result in inferior device performance and stability.

  7. Improved PECVD Si x N y film as a mask layer for deep wet etching of the silicon

    NASA Astrophysics Data System (ADS)

    Han, Jianqiang; Yin, Yi Jun; Han, Dong; Dong, LiZhen

    2017-09-01

    Although plasma enhanced chemical vapor deposition (PECVD) silicon nitride (Si x N y ) films have been extensively investigated by many researchers, requirements of film properties vary from device to device. For some applications utilizing Si x N y film as the mask Layer for deep wet etching of the silicon, it is very desirable to obtain a high quality film. In this study, Si x N y films were deposited on silicon substrates by PECVD technique from the mixtures of NH3 and 5% SiH4 diluted in Ar. The deposition temperature and RF power were fixed at 400 °C and 20 W, respectively. By adjusting the SiH4/NH3 flow ratio, Si x N y films of different compositions were deposited on silicon wafers. The stoichiometry, residual stress, etch rate in 1:50 HF, BHF solution and 40% KOH solution of deposited Si x N y films were measured. The experimental results show that the optimum SiH4/NH3 flow ratio at which deposited Si x N y films can perfectly protect the polysilicon resistors on the front side of wafers during KOH etching is between 1.63 and 2.24 under the given temperature and RF power. Polysilicon resistors protected by the Si x N y films can withstand 6 h 40% KOH double-side etching at 80 °C. At the range of SiH4/NH3 flow ratios, the Si/N atom ratio of films ranges from 0.645 to 0.702, which slightly deviate the ideal stoichiometric ratio of LPCVD Si3N4 film. In addition, the silicon nitride films with the best protection effect are not the films of minimum etch rate in KOH solution.

  8. Low-temperature electron cyclotron resonance plasma-enhanced chemical-vapor deposition silicon dioxide as gate insulator for polycrystalline silicon thin-film transistors

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Maiolo, L.; Pecora, A.; Fortunato, G.

    2006-03-15

    Silicon dioxide films have been deposited at temperatures below 270 deg. C in an electron cyclotron resonance (ECR) plasma reactor from O{sub 2}, SiH{sub 4}, and He gas mixture. Pinhole density analysis as a function of substrate temperature for different microwave powers was carried out. Films deposited at higher microwave power and at room temperature show defect densities (<7 pinhole/mm{sup 2}), ensuring low-temperature process integration on large area. From Fourier transform infrared analysis and thermal desorption spectrometry we also evaluated very low hydrogen content if compared to conventional rf-plasma-enhanced chemical-vapor-deposited (PECVD) SiO{sub 2} deposited at 350 deg. C. Electrical propertiesmore » have been measured in metal-oxide-semiconductor (MOS) capacitors, depositing SiO{sub 2} at RT as gate dielectric; breakdown electric fields >10 MV/cm and charge trapping at fields >6 MV/cm have been evaluated. From the study of interface quality in MOS capacitors, we found that even for low annealing temperature (200 deg. C), it is possible to considerably reduce the interface state density down to 5x10{sup 11} cm{sup -2} eV{sup -1}. To fully validate the ECR-PECVD silicon dioxide we fabricated polycrystalline silicon thin-film transistors using RT-deposited SiO{sub 2} as gate insulator. Different postdeposition thermal treatments have been studied and good device characteristics were obtained even for annealing temperature as low as 200 deg. C.« less

  9. Growth of single wall carbon nanotubes using PECVD technique: An efficient chemiresistor gas sensor

    NASA Astrophysics Data System (ADS)

    Lone, Mohd Yaseen; Kumar, Avshish; Husain, Samina; Zulfequar, M.; Harsh; Husain, Mushahid

    2017-03-01

    In this work, the uniform and vertically aligned single wall carbon nanotubes (SWCNTs) have been grown on Iron (Fe) deposited Silicon (Si) substrate by plasma enhanced chemical vapor deposition (PECVD) technique at very low temperature of 550 °C. The as-grown samples of SWCNTS were characterized by field emission scanning electron microscope (FESEM), high resolution transmission electron microscope (HRTEM) and Raman spectrometer. SWCNT based chemiresistor gas sensing device was fabricated by making the proper gold contacts on the as-grown SWCNTs. The electrical conductance and sensor response of grown SWCNTs have been investigated. The fabricated SWCNT sensor was exposed to ammonia (NH3) gas at 200 ppm in a self assembled apparatus. The sensor response was measured at room temperature which was discussed in terms of adsorption of NH3 gas molecules on the surface of SWCNTs. The achieved results are used to develope a miniaturized gas sensor device for monitoring and control of environment pollutants.

  10. The Performance Improvement of N2 Plasma Treatment on ZrO2 Gate Dielectric Thin-Film Transistors with Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition IGZO Channel.

    PubMed

    Wu, Chien-Hung; Huang, Bo-Wen; Chang, Kow-Ming; Wang, Shui-Jinn; Lin, Jian-Hong; Hsu, Jui-Mei

    2016-06-01

    The aim of this paper is to illustrate the N2 plasma treatment for high-κ ZrO2 gate dielectric stack (30 nm) with indium-gallium-zinc-oxide (IGZO) thin-film transistors (TFTs). Experimental results reveal that a suitable incorporation of nitrogen atoms could enhance the device performance by eliminating the oxygen vacancies and provide an amorphous surface with better surface roughness. With N2 plasma treated ZrO2 gate, IGZO channel is fabricated by atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) technique. The best performance of the AP-PECVD IGZO TFTs are obtained with 20 W-90 sec N2 plasma treatment with field-effect mobility (μ(FET)) of 22.5 cm2/V-s, subthreshold swing (SS) of 155 mV/dec, and on/off current ratio (I(on)/I(off)) of 1.49 x 10(7).

  11. Deposition of amorphous silicon using a tubular reactor with concentric-electrode confinement

    NASA Astrophysics Data System (ADS)

    Conde, J. P.; Chan, K. K.; Blum, J. M.; Arienzo, M.; Cuomo, J. J.

    1992-04-01

    High-quality, hydrogenated amorphous silicon (a-Si:H) is deposited at room temperature by rf glow discharge at a high deposition rate using a tubular reactor with cylindrical symmetry (concentric-electrode plasma-enhanced chemical vapor deposition, CE-PECVD). Using the novel CE-PECVD design, room-temperature deposition of a-Si:H with growth rates up to 14 Å s-1, low hydrogen concentration (≲10%), and the bonded hydrogen in the Si-H monohydride configuration, is achieved for the first time using an rf glow-discharge technique. The influence of the deposition parameters (silane flow rate, pressure, and power density) on the growth rate, optical band gap, and silicon-hydrogen bonding configuration, is quantitatively predicted using a deposition mechanism based on the additive contribution of three growth precursors, SiH2, SiH3, and Si2H6, with decreasing sticking coefficients of 0.7, 0.1, and 0.001, respectively. The low hydrogen concentration is due to the enhanced ion bombardment resulting from the concentric electrode design.

  12. Modeling and experimental study on the growth of silicon germanium film by plasma enhanced chemical vapor deposition

    NASA Astrophysics Data System (ADS)

    Zhao, Lai

    Hydrogenated microcrystalline silicon germanium µc-SiGe:H deposited by plasma enhanced chemical vapor deposition (PECVD) is of great interest to photovoltaic (PV) applications due to its low process temperature and good uniformity over large area. The nature of high optical absorption and low optical bandgap makes it promising as the bottom cell absorbing layer for tandem junction solar cells. However, the addition of germane (GeH4) gas changes deposited film properties and makes it rather complicated for the established silane (SiH4) based discharge process with hydrogen (H2) dilution. Despite existing experimental studies for SiH 4/GeH4/H2 3-gas mixture discharge and comprehensive numerical simulations for SiH4/H2 or SiH4/Ar plasma, to the author's best knowledge, a numerical model for both SiH 4 and GeH4 in a high pressure regime is yet to be developed. The plasma discharge, the film growth and their effects on film properties and the solar device performance need deep understanding. In this dissertation, the growth of the µc-SiGe:H film by radio frequency (RF) PECVD is studied through modeling simulation as well as experiments. The first numerical model for the glow discharge of SiH4/GeH 4/H2 3-gas mixture in a high pressure regime is developed based on one dimensional fluid model. Transports of electrons, molecules, radicals and ions in the RF excitation are described by diffusion equations that are coupled with the Poisson's equation. The deposition is integrated as the boundary conditions for discharge equations through the sticking coefficient model. Neutral ionizations, radical dissociations and chemical reactions in the gas phase and surface kinetics such as the diffusive motion, chemical reactions and the hydrogen etching are included with interaction rate constants. Solved with an explicit central-difference discretization scheme, the model simulates mathematical features that reflect the plasma physics such as the plasma sheath and gas species distributions. The model predicts effects of process conditions on the deposition rate and the Ge chemical content which agree well with experimental results. Tandem junction solar devices are fabricated with the developed µc-SiGe:H film as the bottom cell absorbing layer. Film properties are characterized by determining the Ge content with the Raman peak shift and estimating the optical bandgap with the spectral response measurement. The deposition process is investigated following the fractional factorial experiment design in the 5% Ge content window and then in the amorphous-to-microcrystalline phase transition regime. Gradient Ge content structure is also applied to improve the interface. The conversion efficiency is obtained at 10.62% for the device with 1.2µm thick µc-SiGe:H bottom cell, which is higher than that of the reference device with 1.95µm µc-Si:H. This dissertation has demonstrated a powerful modeling tool to study the multi-gas discharge and deposition in the PECVD environment. The physics behind experimental trends is understood by analyzing temporal and spatial distributions of individual gas species and their interactions. It presents the comprehensive understanding of the growth of the µc-SiGe:H film which leads to the realization of high efficiency and high throughput solar cell devices.

  13. Monolithically interconnected GaAs solar cells: A new interconnection technology for high voltage solar cell output

    NASA Astrophysics Data System (ADS)

    Dinetta, L. C.; Hannon, M. H.

    1995-10-01

    Photovoltaic linear concentrator arrays can benefit from high performance solar cell technologies being developed at AstroPower. Specifically, these are the integration of thin GaAs solar cell and epitaxial lateral overgrowth technologies with the application of monolithically interconnected solar cell (MISC) techniques. This MISC array has several advantages which make it ideal for space concentrator systems. These are high system voltage, reliable low cost monolithically formed interconnections, design flexibility, costs that are independent of array voltage, and low power loss from shorts, opens, and impact damage. This concentrator solar cell will incorporate the benefits of light trapping by growing the device active layers over a low-cost, simple, PECVD deposited silicon/silicon dioxide Bragg reflector. The high voltage-low current output results in minimal 12R losses while properly designing the device allows for minimal shading and resistance losses. It is possible to obtain open circuit voltages as high as 67 volts/cm of solar cell length with existing technology. The projected power density for the high performance device is 5 kW/m for an AMO efficiency of 26% at 1 5X. Concentrator solar cell arrays are necessary to meet the power requirements of specific mission platforms and can supply high voltage power for electric propulsion systems. It is anticipated that the high efficiency, GaAs monolithically interconnected linear concentrator solar cell array will enjoy widespread application for space based solar power needs. Additional applications include remote man-portable or ultra-light unmanned air vehicle (UAV) power supplies where high power per area, high radiation hardness and a high bus voltage or low bus current are important. The monolithic approach has a number of inherent advantages, including reduced cost per interconnect and increased reliability of array connections. There is also a high potential for a large number of consumer products. Dual-use applications can include battery chargers and remote power supplies for consumer electronics products such as portable telephones/beepers, portable radios, CD players, dashboard radar detectors, remote walkway lighting, etc.

  14. Monolithically interconnected GaAs solar cells: A new interconnection technology for high voltage solar cell output

    NASA Technical Reports Server (NTRS)

    Dinetta, L. C.; Hannon, M. H.

    1995-01-01

    Photovoltaic linear concentrator arrays can benefit from high performance solar cell technologies being developed at AstroPower. Specifically, these are the integration of thin GaAs solar cell and epitaxial lateral overgrowth technologies with the application of monolithically interconnected solar cell (MISC) techniques. This MISC array has several advantages which make it ideal for space concentrator systems. These are high system voltage, reliable low cost monolithically formed interconnections, design flexibility, costs that are independent of array voltage, and low power loss from shorts, opens, and impact damage. This concentrator solar cell will incorporate the benefits of light trapping by growing the device active layers over a low-cost, simple, PECVD deposited silicon/silicon dioxide Bragg reflector. The high voltage-low current output results in minimal 12R losses while properly designing the device allows for minimal shading and resistance losses. It is possible to obtain open circuit voltages as high as 67 volts/cm of solar cell length with existing technology. The projected power density for the high performance device is 5 kW/m for an AMO efficiency of 26% at 1 5X. Concentrator solar cell arrays are necessary to meet the power requirements of specific mission platforms and can supply high voltage power for electric propulsion systems. It is anticipated that the high efficiency, GaAs monolithically interconnected linear concentrator solar cell array will enjoy widespread application for space based solar power needs. Additional applications include remote man-portable or ultra-light unmanned air vehicle (UAV) power supplies where high power per area, high radiation hardness and a high bus voltage or low bus current are important. The monolithic approach has a number of inherent advantages, including reduced cost per interconnect and increased reliability of array connections. There is also a high potential for a large number of consumer products. Dual-use applications can include battery chargers and remote power supplies for consumer electronics products such as portable telephones/beepers, portable radios, CD players, dashboard radar detectors, remote walkway lighting, etc.

  15. Materials and processing science: Limits for microelectronics

    NASA Astrophysics Data System (ADS)

    Rosenberg, R.

    1988-09-01

    The theme of this talk will be to illustrate examples of technologies that will drive materials and processing sciences to the limit and to describe some of the research being pursued to understand materials interactions which are pervasive to projected structure fabrication. It is to be expected that the future will see a progression to nanostructures where scaling laws will be tested and quantum transport will become more in evidence, to low temperature operation for tighter control and improved performance, to complex vertical profiles where 3D stacking and superlattices will produce denser packing and device flexibility, to faster communication links with optoelectronics, and to compatible packaging technologies. New low temperature processing techniques, such as epitaxy of silicon, PECVD of dielectrics, low temperature high pressure oxidation, silicon-germanium heterostructures, etc., must be combined with shallow metallurgies, new lithographic technologies, maskless patterning, rapid thermal processing (RTP) to produce needed profile control, reduce process incompatibilities and develop new device geometries. Materials interactions are of special consequence for chip substrates and illustrations of work in metal-ceramic and metal-polymer adhesion will be offered.

  16. Silicon cells made by self-aligned selective-emitter plasma-etchback process

    DOEpatents

    Ruby, Douglas S.; Schubert, William K.; Gee, James M.; Zaidi, Saleem H.

    2000-01-01

    Photovoltaic cells and methods for making them are disclosed wherein the metallized grids of the cells are used to mask portions of cell emitter regions to allow selective etching of phosphorus-doped emitter regions. The preferred etchant is SF.sub.6 or a combination of SF.sub.6 and O.sub.2. This self-aligned selective etching allows for enhanced blue response (versus cells with uniform heavy doping of the emitter) while preserving heavier doping in the region beneath the gridlines needed for low contact resistance. Embodiments are disclosed for making cells with or without textured surfaces. Optional steps include plasma hydrogenation and PECVD nitride deposition, each of which are suited to customized applications for requirements of given cells to be manufactured. The techniques disclosed could replace expensive and difficult alignment methodologies used to obtain selectively etched emitters, and they may be easily integrated with existing plasma processing methods and techniques of the invention may be accomplished in a single plasma-processing chamber.

  17. Analysis of flow field characteristics in IC equipment chamber based on orthogonal design

    NASA Astrophysics Data System (ADS)

    Liu, W. F.; Yang, Y. Y.; Wang, C. N.

    2017-01-01

    This paper aims to study the influence of the configuration of processing chamber as a part of IC equipment on flow field characteristics. Four parameters, including chamber height, chamber diameter, inlet mass flow rate and outlet area, are arranged using orthogonally design method to study their influence on flow distribution in the processing chamber with the commercial software-Fluent. The velocity, pressure and temperature distribution above the holder were analysed respectively. The velocity difference value of the gas flow above the holder is defined as the evaluation criteria to evaluate the uniformity of the gas flow. The quantitative relationship between key parameters and the uniformity of gas flow was found through analysis of experimental results. According to our study, the chamber height is the most significant factor, and then follows the outlet area, chamber diameter and inlet mass flow rate. This research can provide insights into the study and design of configuration of etcher, plasma enhanced chemical vapor deposition (PECVD) equipment, and other systems with similar configuration and processing condition.

  18. Chemical sputtering by H{sub 2}{sup +} and H{sub 3}{sup +} ions during silicon deposition

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Landheer, K., E-mail: c.landheer@uu.nl; Poulios, I.; Rath, J. K.

    2016-08-07

    We investigated chemical sputtering of silicon films by H{sub y}{sup +} ions (with y being 2 and 3) in an asymmetric VHF Plasma Enhanced Chemical Vapor Deposition (PECVD) discharge in detail. In experiments with discharges created with pure H{sub 2} inlet flows, we observed that more Si was etched from the powered than from the grounded electrode, and this resulted in a net deposition on the grounded electrode. With experimental input data from a power density series of discharges with pure H{sub 2} inlet flows, we were able to model this process with a chemical sputtering mechanism. The obtained chemicalmore » sputtering yields were (0.3–0.4) ± 0.1 Si atom per bombarding H{sub y}{sup +} ion at the grounded electrode and at the powered electrode the yield ranged from (0.4 to 0.65) ± 0.1. Subsequently, we investigated the role of chemical sputtering during PECVD deposition with a series of silane fractions S{sub F} (S{sub F}(%) = [SiH{sub 4}]/[H{sub 2}]*100) ranging from S{sub F} = 0% to 20%. We experimentally observed that the SiH{sub y}{sup +} flux is not proportional to S{sub F} but decreasing from S{sub F} = 3.4% to 20%. This counterintuitive SiH{sub y}{sup +} flux trend was partly explained by an increasing chemical sputtering rate with decreasing S{sub F} and partly by the reaction between H{sub 3}{sup +} and SiH{sub 4} that forms SiH{sub 3}{sup +}.« less

  19. Ultralow-Threshold Electrically Pumped Quantum-Dot Photonic-Crystal Nanocavity Laser

    DTIC Science & Technology

    2011-05-01

    we demonstrate a quantum-dot photonic-crystal nanocavity laser in gallium arsenide pumped by a lateral p–i–n junction formed by ion implantation...330 nm layer of silicon nitride was then deposited on the sample using plasma-enhanced chemical vapour deposition (PECVD) to serve as a mask for ion

  20. Silicon surface passivation by silicon nitride deposition

    NASA Technical Reports Server (NTRS)

    Olsen, L. C.

    1984-01-01

    Silicon nitride deposition was studied as a method of passivation for silicon solar cell surfaces. The following three objectives were the thrust of the research: (1) the use of pecvd silicon nitride for passivation of silicon surfaces; (2) measurement techniques for surface recombination velocity; and (3) the importance of surface passivation to high efficiency solar cells.

  1. Surface characteristics and corrosion behaviour of WE43 magnesium alloy coated by SiC film

    NASA Astrophysics Data System (ADS)

    Li, M.; Cheng, Y.; Zheng, Y. F.; Zhang, X.; Xi, T. F.; Wei, S. C.

    2012-01-01

    Amorphous SiC film has been successfully fabricated on the surface of WE43 magnesium alloy by plasma enhanced chemical vapour deposition (PECVD) technique. The microstructure and elemental composition were analyzed by transmission electron microscopy (TEM), glancing angle X-ray diffraction (GAXRD) and X-ray photoelectron spectroscopy (XPS), respectively. The immersion test indicated that SiC film could efficiently slow down the degradation rate of WE43 alloy in simulated body fluid (SBF) at 37 ± 1 °C. The indirect toxicity experiment was conducted using L929 cell line and the results showed that the extraction medium of SiC coated WE43 alloys exhibited no inhibitory effect on L929 cell growth. The in vitro hemocompatibility of the samples was investigated by hemolysis test and blood platelets adhesion test, and it was found that the hemolysis rate of the coated WE43 alloy decreased greatly, and the platelets attached on the SiC film were slightly activated with a round shape. It could be concluded that SiC film prepared by PECVD made WE43 alloy more appropriate to biomedical application.

  2. Study of p-type and intrinsic materials for amorphous silicon based solar cells

    NASA Astrophysics Data System (ADS)

    Du, Wenhui

    This dissertation summarizes the research work on the investigation and optimization of high efficiency hydrogenated amorphous silicon (a-Si:H) based thin film n-i-p single-junction and multi-junction solar cells, deposited using radio frequency (RF) and very high frequency (VHF) plasma enhanced chemical vapor deposition (PECVD) techniques. The fabrication and characterization of high quality p-type and intrinsic materials for a-Si:H based solar cells have been systematically and intensively studied. Hydrogen dilution, substrate temperature, gas flow rate, RF- or VHF-power density, and films deposition time have been optimized to obtain "on-the-edge" materials. To understand the material structure of the silicon p-layer providing a high Voc a-Si:H solar cell, hydrogenated amorphous, protocrystalline, and nanocrystalline silicon p-layers have been prepared using RF-PECVD and characterized by Raman spectroscopy and high resolution transmission electronic microscopy (HRTEM). It was found that the optimum Si:H p-layer for n-i-p a-Si:H solar cells is composed of fine-grained nanocrystals with crystallite sizes in the range of 3-5 nm embedded in an amorphous network. Using the optimized p-layer, an a-Si:H single-junction solar cell with a very high Voc value of 1.042 V and a FF value of 0.74 has been obtained. a-Si:H, a-SiGe:H and nc-Si:H i-layers have been prepared using RF- and VHF-PECVD techniques and monitored by different optical and electrical characterizations. Single-junction a-Si:H, a-SiGe and nc-Si:H cells have been developed and optimized. Intermediate bandgap a-SiGe:H solar cells achieved efficiencies over 12.5%. On the basis of optimized component cells, we achieved a-Si:Hla-SiGe:H tandem solar cells with efficiencies of ˜12.9% and a-Si:H/a-SiGe:H/a-SiGe:H triple-junction cells with efficiencies of ˜12.03%. VHF-PECVD technique was used to increase the deposition rates of the narrow bandgap materials. The deposition rate for a-SiGe:H i-layer attained 9 A/sec and the solar cell had a V oc of 0.588 V, Jsc of 20.4 mA/cm2, FF of 0.63, and efficiency of 7.6%. Preliminary research on the preparation of a-Si:Hlnc-Si:H tandem solar cells and a-Si:Hla-SiGe:Hlnc-Si:H triple-junction cells has also been undertaken using VHF nc-Si:H bottom cells with deposition rates of 6 A/sec. All I-V measurements were carried out under AM1.5G (100 MW/cm2) and the cell area was 0.25 cm2.

  3. Efficient 'Optical Furnace': A Cheaper Way to Make Solar Cells is Reaching the Marketplace

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    von Kuegelgen, T.

    In Bhushan Sopori's laboratory, you'll find a series of optical furnaces he has developed for fabricating solar cells. When not in use, they sit there discreetly among the lab equipment. But when a solar silicon wafer is placed inside one for processing, Sopori walks over to a computer and types in a temperature profile. Almost immediately this fires up the furnace, which glows inside and selectively heats up the silicon wafer to 800 degrees centigrade by the intense light it produces. Sopori, a principal engineer at the National Renewable Energy Laboratory, has been researching and developing optical furnace technology formore » around 20 years. He says it's a challenging technology to develop because there are many issues to consider when you process a solar cell, especially in optics. Despite the challenges, Sopori and his research team have advanced the technology to the point where it will benefit all solar cell manufacturers. They are now developing a commercial version of the furnace in partnership with a manufacturer. 'This advanced optical furnace is highly energy efficient, and it can be used to manufacture any type of solar cell,' he says. Each type of solar cell or manufacturing process typically requires a different furnace configuration and temperature profile. With NREL's new optical furnace system, a solar cell manufacturer can ask the computer for any temperature profile needed for processing a solar cell, and the same type of furnace is suitable for several solar cell fabrication process steps. 'In the future, solar cell manufacturers will only need this one optical furnace because it can be used for any process, including diffusion, metallization and oxidation,' Sopori says. 'This helps reduce manufacturing costs.' One startup company, Applied Optical Systems, has recognized the furnace's potential for manufacturing thin-film silicon cells. 'We'd like to develop thin-film silicon cells with higher efficiencies, up to 15 to 18 percent, and we believe this furnace will enable us to do so,' says A. Rangappan, founder and CEO of Applied Optical Systems. Rangappan also says it will take only a few minutes for the optical furnace to process a thin-film solar cell, which reduces manufacturing costs. Overall, he estimates the company's solar cell will cost around 80 cents per watt. For manufacturing these thin-film silicon cells, Applied Optical Systems and NREL have developed a partnership through a cooperative research and development agreement (CRADA) to construct an optical furnace system prototype. DOE is providing $500,000 from its Technology Commercialization Development Fund to help offset the prototype's development costs because of the technology's significant market potential. The program has provided the NREL technology transfer office with a total of $4 million to expand such collaborative efforts between NREL researchers and companies. Applied Optical will construct a small version of the optical furnace based on the prototype design in NREL's process development and integration laboratory through a separate CRADA. This small furnace will only develop one solar cell wafer at a time. Then, the company will construct a large, commercial-scale optical furnace at its own facilities, which will turn out around 1,000 solar cell wafers per hour. 'We hope to start using the optical furnace for manufacturing within four to five years,' Rangappan says. Meanwhile, another partnership using the optical furnace has evolved between NREL and SiXtron Advanced Materials, another startup. Together they'll use the optical furnace to optimize the metallization process for novel antireflective solar cell coatings. The process is not only expected to yield higher efficiencies for silicon-based solar cells, but also lowers processing costs and eliminates safety concerns for manufacturers. Most solar cell manufacturers currently use a plasma-enhanced chemical vapor deposition (PECVD) system with compressed and extremely pyrophoric silane gas (SiH4) for applying passivation antireflective coatings (ARC). If silane is exposed to air, the SiH4 will explode - a serious safety issue for high-volume manufacturers. SiXtron's process uses a solid, silicon-based polymer that's converted into noncompressed, nonexplosive gas, which then flows to a standard PECVD system. 'The solid source is so safe to handle that it can be shipped by FedEx,' says Zbigniew Barwicz, president and CEO of SiXtron. Barwicz says manufacturers can use the same PECVD processing equipment for the SiXtron process that they already use for SiH4, a plug-and-play solution. For this novel passivation ARC process, NREL is helping to optimize the metallization parameters. NREL has developed a new technology called optical processing. One of the applications of this process is fire-through contact formation of silicon solar cells.« less

  4. The remote sensing image segmentation mean shift algorithm parallel processing based on MapReduce

    NASA Astrophysics Data System (ADS)

    Chen, Xi; Zhou, Liqing

    2015-12-01

    With the development of satellite remote sensing technology and the remote sensing image data, traditional remote sensing image segmentation technology cannot meet the massive remote sensing image processing and storage requirements. This article put cloud computing and parallel computing technology in remote sensing image segmentation process, and build a cheap and efficient computer cluster system that uses parallel processing to achieve MeanShift algorithm of remote sensing image segmentation based on the MapReduce model, not only to ensure the quality of remote sensing image segmentation, improved split speed, and better meet the real-time requirements. The remote sensing image segmentation MeanShift algorithm parallel processing algorithm based on MapReduce shows certain significance and a realization of value.

  5. Sol-gel-Derived nano-sized double layer anti-reflection coatings (SiO2/TiO2) for low-cost solar cell fabrication.

    PubMed

    Lee, Seung Jun; Hur, Man Gyu; Yoon, Dae Ho

    2013-11-01

    We investigate nano-sized double layer anti-reflection coatings (ARCs) using a TiO2 and SiO2 sol-gel solution process for mono-crystalline silicon solar cells. The process can be easily adapted for spraying sol-gel coatings to reduce manufacturing cost. The spray-coated SiO2/TiO2 nano-sized double layer ARCs were deposited on mono-crystalline silicon solar cells, and they showed good optical properties. The spray coating process is a lower-cost fabrication process for large-scale coating than vacuum deposition processes such as PECVD. The measured average optical reflectance (300-1200 nm) was about approximately 8% for SiO2/TiO2 nano-sized double layer ARCs. The electrical parameters of a mono-crystalline silicon solar cell and reflection losses show that the SiO2/TiO2 stacks can improve cell efficiency by 0.2% compared to a non-coated mono-crystalline silicon solar cell. In the results, good correlation between theoretical and experimental data was obtained. We expect that the sol-gel spray-coated mono-crystalline silicon solar cells have high potential for low-cost solar cell fabrication.

  6. RETRACTED: Growth and characterization of carbon nanotubes and zinc oxide nanocomposite with the PECVD technique

    NASA Astrophysics Data System (ADS)

    Salar Elahi, A.; Ghoranneviss, M.

    This article has been retracted: please see Elsevier Policy on Article Withdrawal (https://www.elsevier.com/about/our-business/policies/article-withdrawal) This article has been retracted at the request of the Editors-in-Chief. After a thorough investigation, the Editors have concluded that the acceptance of this article was based upon the positive advice of at least one illegitimate reviewer report. The report was submitted from an email account which was provided to the journal as a suggested reviewer during the submission of the article. Although purportedly a real reviewer account, the Editors have concluded that this was not of an appropriate, independent reviewer. This manipulation of the peer-review process represents a clear violation of the fundamentals of peer review, our publishing policies, and publishing ethics standards. Apologies are offered to the reviewers whose identities were assumed and to the readers of the journal that this deception was not detected during the submission process.

  7. Uniformity control of the deposition rate profile of a-Si:H film by gas velocity and temperature distributions in a capacitively coupled plasma reactor

    NASA Astrophysics Data System (ADS)

    Kim, Ho Jun; Lee, Hae June

    2018-03-01

    The effect of neutral transport on the deposition rate profiles of thin films formed by plasma-enhanced chemical vapor deposition (PECVD) is investigated to improve the uniformity of amorphous hydrogenated silicon films. The PECVD reactor with a cylindrical showerhead is numerically simulated with a variation of the gas velocity and temperature in the capacitively coupled plasma with an intermediate-pressure SiH4/He gas mixture. The modulation of the gas velocity distribution results in a noticeable change in the density distributions of neutral molecules such as SiH4, SiH3, H, SiH2, and Si2H6, especially in the vicinity of the electrode edge. With the locally accelerated gas flow, the concomitant increase in Si2H6 density near the electrode edge induces increases in both the electron density and the deposition rate profile near the electrode edge. In addition, it is observed that changing the surface temperature distribution by changing the sidewall temperature can also effectively modulate the plasma density distributions. The simulated deposition rate profile matches the experimental data well, even under non-isothermal wall boundary conditions.

  8. Effect of power on growth of nanocrystalline silicon films deposited by VHF PECVD technique for solar cell applications

    NASA Astrophysics Data System (ADS)

    Juneja, Sucheta; Verma, Payal; Savelyev, Dmitry A.; Khonina, Svetlana N.; Sudhakar, S.; Kumar, Sushil

    2016-04-01

    An investigation of the effect of power on the deposition of nanocrystalline silicon thin films were carried out using a gaseous mixture of silane and hydrogen in the 60MHz assisted VHF plasma enhanced chemical vapor deposition (PECVD) technique. The power was varied from 10 to 50 watt maintaining all other parameters constant. Corresponding layer properties w.r.t. material microstructure, optical, hydrogen content and electrical transport are studied in detail. The structural properties have been studied by Raman spectroscopy and x-ray diffraction (XRD). The presence of nano-sized crystals and their morphology have been investigated using atomic force microscopy (AFM). The role of bonded hydrogen content in the films have been studied from the results of Fourier transform infrared spectroscopy. It was observed from the results that with increase in power, crystalline volume fraction increases and crystallite size changes from 4 to 9 nm. The optical band gap varies from 1.7 to 2.1eV due to quantum confinement effect and which further can be explained with reduced hydrogen content. These striking features of nc-Si films can be used to fabricate stable thin film solar cells.

  9. Towards high frequency heterojunction transistors: Electrical characterization of N-doped amorphous silicon-graphene diodes

    NASA Astrophysics Data System (ADS)

    Strobel, C.; Chavarin, C. A.; Kitzmann, J.; Lupina, G.; Wenger, Ch.; Albert, M.; Bartha, J. W.

    2017-06-01

    N-type doped amorphous hydrogenated silicon (a-Si:H) is deposited on top of graphene (Gr) by means of very high frequency (VHF) and radio frequency plasma-enhanced chemical vapor deposition (PECVD). In order to preserve the structural integrity of the monolayer graphene, a plasma excitation frequency of 140 MHz was successfully applied during the a-Si:H VHF-deposition. Raman spectroscopy results indicate the absence of a defect peak in the graphene spectrum after the VHF-PECVD of (n)-a-Si:H. The diode junction between (n)-a-Si:H and graphene was characterized using temperature dependent current-voltage (IV) and capacitance-voltage measurements, respectively. We demonstrate that the current at the (n)-a-Si:H-graphene interface is dominated by thermionic emission and recombination in the space charge region. The Schottky barrier height (qΦB), derived by temperature dependent IV-characteristics, is about 0.49 eV. The junction properties strongly depend on the applied deposition method of (n)-a-Si:H with a clear advantage of the VHF(140 MHz)-technology. We have demonstrated that (n)-a-Si:H-graphene junctions are a promising technology approach for high frequency heterojunction transistors.

  10. 40 CFR 408.100 - Applicability; description of the remote Alaskan shrimp processing subcategory.

    Code of Federal Regulations, 2010 CFR

    2010-07-01

    ... remote Alaskan shrimp processing subcategory. 408.100 Section 408.100 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Remote Alaskan Shrimp Processing Subcategory § 408.100 Applicability; description of the remote Alaskan shrimp processing subcategory. The provisions of this subpart are applicable...

  11. 40 CFR 408.100 - Applicability; description of the remote Alaskan shrimp processing subcategory.

    Code of Federal Regulations, 2011 CFR

    2011-07-01

    ... remote Alaskan shrimp processing subcategory. 408.100 Section 408.100 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Remote Alaskan Shrimp Processing Subcategory § 408.100 Applicability; description of the remote Alaskan shrimp processing subcategory. The provisions of this subpart are applicable...

  12. 40 CFR 408.90 - Applicability; description of the non-remote Alaskan shrimp processing subcategory.

    Code of Federal Regulations, 2011 CFR

    2011-07-01

    ...-remote Alaskan shrimp processing subcategory. 408.90 Section 408.90 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Non-Remote Alaskan Shrimp Processing Subcategory § 408.90 Applicability; description of the non-remote Alaskan shrimp processing subcategory. The provisions of this subpart are...

  13. 40 CFR 408.90 - Applicability; description of the non-remote Alaskan shrimp processing subcategory.

    Code of Federal Regulations, 2010 CFR

    2010-07-01

    ...-remote Alaskan shrimp processing subcategory. 408.90 Section 408.90 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Non-Remote Alaskan Shrimp Processing Subcategory § 408.90 Applicability; description of the non-remote Alaskan shrimp processing subcategory. The provisions of this subpart are...

  14. 40 CFR 408.50 - Applicability; description of the remote Alaskan crab meat processing subcategory.

    Code of Federal Regulations, 2010 CFR

    2010-07-01

    ... remote Alaskan crab meat processing subcategory. 408.50 Section 408.50 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Remote Alaskan Crab Meat Processing Subcategory § 408.50 Applicability; description of the remote Alaskan crab meat processing subcategory. The provisions of this subpart are...

  15. 40 CFR 408.50 - Applicability; description of the remote Alaskan crab meat processing subcategory.

    Code of Federal Regulations, 2011 CFR

    2011-07-01

    ... remote Alaskan crab meat processing subcategory. 408.50 Section 408.50 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Remote Alaskan Crab Meat Processing Subcategory § 408.50 Applicability; description of the remote Alaskan crab meat processing subcategory. The provisions of this subpart are...

  16. Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries.

    PubMed

    Zargouni, Yafa; Deheryan, Stella; Radisic, Alex; Alouani, Khaled; Vereecken, Philippe M

    2017-05-27

    In this work, we present the electrochemical deposition of manganese dioxide (MnO₂) thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD), is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO₂ (EMD) coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li⁺ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications.

  17. Mechanical properties and tribological behavior of fullerene-like hydrogenated carbon films prepared by changing the flow rates of argon gas

    NASA Astrophysics Data System (ADS)

    Guo, Junmeng; Wang, Yongfu; Liang, Hongyu; Liang, Aimin; Zhang, Junyan

    2016-02-01

    Fullerene-like hydrogenated carbon (FL-C:H) films as carbon materials were prepared by direct current plasma enhanced chemical vapor deposition (dc-PECVD) technique. The content of FL nanostructure was confirmed by high-resolution transmission electron microscopy (HRTEM), visible Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS). The effect of fullerene-like nanostructure on the friction behavior of the films was studied using a reciprocating ball-on-flat tribometer in humid environment. It is concluded that the curved FL nanostructure provide the film excellent mechanical properties and friction performance. Interestingly, combining with the results of Raman analyses of the wear debris, we find that new FL nanostructure form during the friction process. These new FL nanostructure may originate from the rapid annealing and stress relaxation of unstable carbon clusters.

  18. Electrolytic Manganese Dioxide Coatings on High Aspect Ratio Micro-Pillar Arrays for 3D Thin Film Lithium Ion Batteries

    PubMed Central

    Zargouni, Yafa; Deheryan, Stella; Radisic, Alex; Alouani, Khaled; Vereecken, Philippe M.

    2017-01-01

    In this work, we present the electrochemical deposition of manganese dioxide (MnO2) thin films on carbon-coated TiN/Si micro-pillars. The carbon buffer layer, grown by plasma enhanced chemical vapor deposition (PECVD), is used as a protective coating for the underlying TiN current collector from oxidation, during the film deposition, while improving the electrical conductivity of the stack. A conformal electrolytic MnO2 (EMD) coating is successfully achieved on high aspect ratio C/TiN/Si pillar arrays by tailoring the deposition process. Lithiation/Delithiation cycling tests have been performed. Reversible insertion and extraction of Li+ through EMD structure are observed. The fabricated stack is thus considered as a good candidate not only for 3D micorbatteries but also for other energy storage applications. PMID:28555017

  19. 40 CFR 408.40 - Applicability; description of the non-remote Alaskan crab meat processing subcategory.

    Code of Federal Regulations, 2010 CFR

    2010-07-01

    ...-remote Alaskan crab meat processing subcategory. 408.40 Section 408.40 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Non-Remote Alaskan Crab Meat Processing Subcategory § 408.40 Applicability; description of the non-remote Alaskan crab meat processing subcategory. The provisions of this subpart are...

  20. 40 CFR 408.40 - Applicability; description of the non-remote Alaskan crab meat processing subcategory.

    Code of Federal Regulations, 2011 CFR

    2011-07-01

    ...-remote Alaskan crab meat processing subcategory. 408.40 Section 408.40 Protection of Environment... PROCESSING POINT SOURCE CATEGORY Non-Remote Alaskan Crab Meat Processing Subcategory § 408.40 Applicability; description of the non-remote Alaskan crab meat processing subcategory. The provisions of this subpart are...

  1. In situ spectroscopic ellipsometry study of low-temperature epitaxial silicon growth

    NASA Astrophysics Data System (ADS)

    Halagačka, L.; Foldyna, M.; Leal, R.; Roca i Cabarrocas, P.

    2018-07-01

    Low-temperature growth of doped epitaxial silicon layers is a promising way to reduce the cost of p-n junction formation in c-Si solar cells. In this work, we study process of highly doped epitaxial silicon layer growth using in situ spectroscopic ellipsometry. The film was deposited by plasma-enhanced chemical vapor deposition (PECVD) on a crystalline silicon substrate at a low substrate temperature of 200 °C. In the deposition process, SiF4 was used as a precursor, B2H6 as doping gas, and a hydrogen/argon mixture as carrier gas. A spectroscopic ellipsometer with a wide spectral range was used for in situ spectroscopic measurements. Since the temperature during process is 200 °C, the optical functions of silicon differ from these at room temperature and have to be adjusted. Thickness of the epitaxial silicon layer was fitted on in situ ellipsometric data. As a result we were able to determine the dynamics of epitaxial layer growth, namely initial layer formation time and epitaxial growth rate. This study opens new perspectives in understanding and monitoring the epitaxial silicon deposition processes as the model fitting can be applied directly during the growth.

  2. Carbon Nanotubes/Nanofibers by Plasma Enhanced Chemical Vapour Deposition

    NASA Technical Reports Server (NTRS)

    Teo, K. B. K.; Hash, D. B.; Bell, M. S.; Chhowalla, M.; Cruden, B. A.; Amaratunga, G. A. J.; Meyyappan, M.; Milne, W. I.

    2005-01-01

    Plasma enhanced chemical vapour deposition (PECVD) has been recently used for the production of vertically aligned carbon nanotubedfibers (CN) directly on substrates. These structures are potentially important technologically as electron field emitters (e.g. microguns, microwave amplifiers, displays), nanoelectrodes for sensors, filter media, superhydrophobic surfaces and thermal interface materials for microelectronics. A parametric study on the growth of CN grown by glow discharge dc-PECVD is presented. In this technique, a substrate containing thin film Ni catalyst is exposed to C2H2 and NH3 gases at 700 C. Without plasma, this process is essentially thermal CVD which produces curly spaghetti-like CN as seen in Fig. 1 (a). With the plasma generated by biasing the substrate at -6OOV, we observed that the CN align vertically during growth as shown in Fig. l(b), and that the magnitude of the applied substrate bias affects the degree of alignment. The thickness of the thin film Ni catalyst was found to determine the average diameter and inversely the length of the CN. The yield and density of the CN were controlled by the use of different diffusion barrier materials under the Ni catalyst. Patterned CN growth [Fig. l(c)], with la variation in CN diameter of 4.1% and 6.3% respectively, is achieved by lithographically defining the Ni thin film prior to growth. The shape of the structures could be varied from very straight nanotube-like to conical tip-like nanofibers by increasing the ratio of C2H2 in the gas flow. Due to the plasma decomposition of C2H2, amorphous carbon (a-C) is an undesirable byproduct which could coat the substrate during CN growth. Using a combination of depth profiled Auger electron spectroscopy to study the substrate and in-situ mass spectroscopy to examine gas phase neutrals and ions, the optimal conditions for a-C free growth of CN is determined.

  3. Cybernetic Basis and System Practice of Remote Sensing and Spatial Information Science

    NASA Astrophysics Data System (ADS)

    Tan, X.; Jing, X.; Chen, R.; Ming, Z.; He, L.; Sun, Y.; Sun, X.; Yan, L.

    2017-09-01

    Cybernetics provides a new set of ideas and methods for the study of modern science, and it has been fully applied in many areas. However, few people have introduced cybernetics into the field of remote sensing. The paper is based on the imaging process of remote sensing system, introducing cybernetics into the field of remote sensing, establishing a space-time closed-loop control theory for the actual operation of remote sensing. The paper made the process of spatial information coherently, and improved the comprehensive efficiency of the space information from acquisition, procession, transformation to application. We not only describes the application of cybernetics in remote sensing platform control, sensor control, data processing control, but also in whole system of remote sensing imaging process control. We achieve the information of output back to the input to control the efficient operation of the entire system. This breakthrough combination of cybernetics science and remote sensing science will improve remote sensing science to a higher level.

  4. Ultra-Low Density Aerogel Mirror Substrates

    DTIC Science & Technology

    1993-04-01

    Silica aerogel materials were fabricated by both the high temperature and low temperature methods at the Lawrence Livermore National Laboratory in...evaporation techniques were used to planarize the silica aerogel with SiO 2 prior to metalization. The PECVD was performed at the Cornell University...incident hv. Defect Physics Silica aerogel is an amorphous SiO, matrix of high porosity (or a low density disordered material). The amorphous r~ature of

  5. Ultrathin Carbon Film Protected Silver Nanostructures for Surface-Enhanced Raman Scattering.

    PubMed

    Peng, Yinshan; Zheng, Xianliang; Tian, Hongwei; Cui, Xiaoqiang; Chen, Hong; Zheng, Weitao

    2016-06-23

    In this article, ultrathin carbon film protected silver substrate (Ag/C) was prepared via a plasma-enhanced chemical vapor deposition (PECVD) method. The morphological evolution of silver nanostructures underneath, as well as the surface-enhanced Raman scattering (SERS) activity of Ag/C hybrid can be tuned by controlling the deposition time. The stability and reproducibility of the as-prepared hybrid were also studied. © The Author(s) 2016.

  6. CMUTs with high-K atomic layer deposition dielectric material insulation layer.

    PubMed

    Xu, Toby; Tekes, Coskun; Degertekin, F

    2014-12-01

    Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. The model shows that both high dielectric constant and the electrical breakdown strength are important for the dielectric material, and significant performance improvement can be achieved, especially as the vacuum gap thickness is reduced. In particular, ALD hafnium oxide (HfO2) is evaluated and used as an improvement over plasma-enhanced chemical vapor deposition (PECVD) silicon nitride (Six)Ny)) for CMUTs fabricated by a low-temperature, complementary metal oxide semiconductor transistor-compatible, sacrificial release method. Relevant properties of ALD HfO2) such as dielectric constant and breakdown strength are characterized to further guide CMUT design. Experiments are performed on parallel fabricated test CMUTs with 50-nm gap and 16.5-MHz center frequency to measure and compare pressure output and receive sensitivity for 200-nm PECVD Six)Ny) and 100-nm HfO2) insulation layers. Results for this particular design show a 6-dB improvement in receiver output with the collapse voltage reduced by one-half; while in transmit mode, half the input voltage is needed to achieve the same maximum output pressure.

  7. Ultrafast optical measurements of surface waves on a patterned layered nanostructure

    NASA Astrophysics Data System (ADS)

    Daly, Brian; Bjornsson, Matteo; Connolly, Aine; Mahat, Sushant; Rachmilowitz, Bryan; Antonelli, George; Myers, Alan; Yoo, Hui-Jae; Singh, Kanwal; King, Sean

    2015-03-01

    We report ultrafast optical pump-probe measurements of 12 - 54 GHz surface acoustic waves (SAWs) on patterned layered nanostructures. These very high frequency SAWs were generated and detected on the following patterned film stack: 25 nm physically vapor deposited TiN / 180 nm porous PECVD-grown a-SiOC:H dielectric / 12 nm non-porous PECVD-grown a-SiOC:H etch-stop / 100 nm CVD-grown a-SiO2 / Si (100) substrate. The TiN layer was dry plasma etched to form lines of rectangular cross section with pitches of 420 nm, 250 nm, 180 nm, and 168 nm and the lines were oriented parallel to the [110] direction on the wafer surface. The absorption of ultrafast pulses from a Ti:sapphire oscillator operating at 800 nm generated SAWs that were detected by time-delayed probe pulses from the same oscillator via a reflectivity change (ΔR) . In each of the four cases the SAW frequency increased with decreasing pitch, but not in a linear way as had been seen in previous experiments of this sort. By comparing the results with mechanical simulations, we present evidence for the detection of different types of SAWs in each case, including Rayleigh-like waves, Sezawa waves, and leaky or radiative waves. This work was supported by NSF Award DMR1206681.

  8. Low temperature plasma enhanced CVD epitaxial growth of silicon on GaAs: a new paradigm for III-V/Si integration

    NASA Astrophysics Data System (ADS)

    Cariou, Romain; Chen, Wanghua; Maurice, Jean-Luc; Yu, Jingwen; Patriarche, Gilles; Mauguin, Olivia; Largeau, Ludovic; Decobert, Jean; Roca I Cabarrocas, Pere

    2016-05-01

    The integration of III-V semiconductors with silicon is a key issue for photonics, microelectronics and photovoltaics. With the standard approach, namely the epitaxial growth of III-V on silicon, thick and complex buffer layers are required to limit the crystalline defects caused by the interface polarity issues, the thermal expansion, and lattice mismatches. To overcome these problems, we have developed a reverse and innovative approach to combine III-V and silicon: the straightforward epitaxial growth of silicon on GaAs at low temperature by plasma enhanced CVD (PECVD). Indeed we show that both GaAs surface cleaning by SiF4 plasma and subsequent epitaxial growth from SiH4/H2 precursors can be achieved at 175 °C. The GaAs native oxide etching is monitored with in-situ spectroscopic ellipsometry and Raman spectroscopy is used to assess the epitaxial silicon quality. We found that SiH4 dilution in hydrogen during deposition controls the layer structure: the epitaxial growth happens for deposition conditions at the transition between the microcrystalline and amorphous growth regimes. SIMS and STEM-HAADF bring evidences for the interface chemical sharpness. Together, TEM and XRD analysis demonstrate that PECVD enables the growth of high quality relaxed single crystal silicon on GaAs.

  9. Solution-derived SiO2 gate insulator formed by CO2 laser annealing for polycrystalline silicon thin-film transistors

    NASA Astrophysics Data System (ADS)

    Hishitani, Daisuke; Horita, Masahiro; Ishikawa, Yasuaki; Ikenoue, Hiroshi; Uraoka, Yukiharu

    2017-05-01

    The formation of perhydropolysilazane (PHPS)-based SiO2 films by CO2 laser annealing is proposed. Irradiation with a CO2 laser with optimum fluence transformed a prebaked PHPS film into a SiO2 film with uniform composition in the thickness direction. Polycrystalline silicon thin-film transistors (poly-Si TFTs) with a SiO2 film as the gate insulator were fabricated. When the SiO2 film was formed by CO2 laser annealing (CO2LA) at the optimum fluence of 20 mJ/cm2, the film had fewer OH groups which was one-twentieth that of the furnace annealed PHPS film and one-hundredth that of the SiO2 film deposited by plasma-enhanced chemical vapor deposition (PECVD) using tetraethyl orthosilicate (TEOS). The resulting TFTs using PHPS showed a clear transistor operation with a field-effect mobility of 37.9 ± 1.2 cm2 V-1 s-1, a threshold voltage of 9.8 ± 0.2 V, and a subthreshold swing of 0.76 ± 0.02 V/decade. The characteristics of such TFTs were as good as those of a poly-Si TFT with a SiO2 gate insulator prepared by PECVD using TEOS.

  10. Decoration of vertical graphene with aerosol nanoparticles for gas sensing

    NASA Astrophysics Data System (ADS)

    Cui, Shumao; Guo, Xiaoru; Ren, Ren; Zhou, Guihua; Chen, Junhong

    2015-08-01

    A facile method was demonstrated to decorate aerosol Ag nanoparticles onto vertical graphene surfaces using a mini-arc plasma reactor. The vertical graphene was directly grown on a sensor electrode using a plasma-enhanced chemical vapor deposition (PECVD) method. The aerosol Ag nanoparticles were synthesized by a simple vapor condensation process using a mini-arc plasma source. Then, the nanoparticles were assembled on the surface of vertical graphene through the assistance of an electric field. Based on our observation, nonagglomerated Ag nanoparticles formed in the gas phase and were assembled onto vertical graphene sheets. Nanohybrids of Ag nanoparticle-decorated vertical graphene were characterized for ammonia gas detection at room temperature. The vertical graphene served as the conductance channel, and the conductance change upon exposure to ammonia was used as the sensing signal. The sensing results show that Ag nanoparticles significantly improve the sensitivity, response time, and recovery time of the sensor.

  11. Phosphorus-doped glass proton exchange membranes for low temperature direct methanol fuel cells

    NASA Astrophysics Data System (ADS)

    Prakash, Shruti; Mustain, William E.; Park, SeongHo; Kohl, Paul A.

    Phosphorus-doped silicon dioxide thin films were used as ion exchange membranes in low temperature proton exchange membrane fuel cells. Phosphorus-doped silicon dioxide glass (PSG) was deposited via plasma-enhanced chemical vapor deposition (PECVD). The plasma deposition of PSG films allows for low temperature fabrication that is compatible with current microelectronic industrial processing. SiH 4, PH 3 and N 2O were used as the reactant gases. The effect of plasma deposition parameters, substrate temperature, RF power, and chamber pressure, on the ionic conductivity of the PSG films is elucidated. PSG conductivities as high as 2.54 × 10 -4 S cm -1 were realized, which is 250 times higher than the conductivity of pure SiO 2 films (1 × 10 -6 S cm -1) under identical deposition conditions. The higher conductivity films were deposited at low temperature, moderate pressure, limited reactant gas flow rate, and high RF power.

  12. Broadly tunable thin-film intereference coatings: active thin films for telecom applications

    NASA Astrophysics Data System (ADS)

    Domash, Lawrence H.; Ma, Eugene Y.; Lourie, Mark T.; Sharfin, Wayne F.; Wagner, Matthias

    2003-06-01

    Thin film interference coatings (TFIC) are the most widely used optical technology for telecom filtering, but until recently no tunable versions have been known except for mechanically rotated filters. We describe a new approach to broadly tunable TFIC components based on the thermo-optic properties of semiconductor thin films with large thermo-optic coefficients 3.6X10[-4]/K. The technology is based on amorphous silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD), a process adapted for telecom applications from its origins in the flat-panel display and solar cell industries. Unlike MEMS devices, tunable TFIC can be designed as sophisticated multi-cavity, multi-layer optical designs. Applications include flat-top passband filters for add-drop multiplexing, tunable dispersion compensators, tunable gain equalizers and variable optical attenuators. Extremely compact tunable devices may be integrated into modules such as optical channel monitors, tunable lasers, gain-equalized amplifiers, and tunable detectors.

  13. Hydrogen plasma treatment of very thin p-type nanocrystalline Si films grown by RF-PECVD in the presence of B(CH3)3

    PubMed Central

    Filonovich, Sergej Alexandrovich; Águas, Hugo; Busani, Tito; Vicente, António; Araújo, Andreia; Gaspar, Diana; Vilarigues, Marcia; Leitão, Joaquim; Fortunato, Elvira; Martins, Rodrigo

    2012-01-01

    We have characterized the structure and electrical properties of p-type nanocrystalline silicon films prepared by radio-frequency plasma-enhanced chemical vapor deposition and explored optimization methods of such layers for potential applications in thin-film solar cells. Particular attention was paid to the characterization of very thin (∼20 nm) films. The cross-sectional morphology of the layers was studied by fitting the ellipsometry spectra using a multilayer model. The results suggest that the crystallization process in a high-pressure growth regime is mostly realized through a subsurface mechanism in the absence of the incubation layer at the substrate-film interface. Hydrogen plasma treatment of a 22-nm-thick film improved its electrical properties (conductivity increased more than ten times) owing to hydrogen insertion and Si structure rearrangements throughout the entire thickness of the film. PMID:27877504

  14. Optical properties of diamond like carbon nanocomposite thin films

    NASA Astrophysics Data System (ADS)

    Alam, Md Shahbaz; Mukherjee, Nillohit; Ahmed, Sk. Faruque

    2018-05-01

    The optical properties of silicon incorporated diamond like carbon (Si-DLC) nanocomposite thin films have been reported. The Si-DLC nanocomposite thin film deposited on glass and silicon substrate by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) process. Fourier transformed infrared spectroscopic analysis revealed the presence of different bonding within the deposited films and deconvolution of FTIR spectra gives the chemical composition i.e., sp3/sp2 ratio in the films. Optical band gap calculated from transmittance spectra increased from 0.98 to 2.21 eV with a variation of silicon concentration from 0 to 15.4 at. %. Due to change in electronic structure by Si incorporation, the Si-DLC film showed a broad photoluminescence (PL) peak centered at 467 nm, i.e., in the visible range and its intensity was found to increase monotonically with at. % of Si.

  15. Synthesis and properties of SiN coatings as stable fluorescent markers on vertically aligned carbon nanofibers

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Pearce, Ryan; Klein, Kate L; Ivanov, Ilia N

    2014-01-01

    The growth of vertically aligned carbon nanofibers (VACNFs) in a catalytic dc ammonia/acetylene plasma process on silicon substrates is often accompanied by sidewall deposition of material that contains mostly Si and N. In fluorescent microscopy experiments, imaging VACNF interfacing to live cell cultures it turned out that this material is broadly fluorescent, which made VACNFs useful as spatial markers, or created nuisance when DNA-labeling got masked. In this paper we provide insight into nature of this silicon/nitrogen in situ coatings. Here we have proposed a potential mechanism for deposition of SiNx coating on the sidewalls of VACNFs during PECVD synthesismore » in addition to exploring the origin of the coatings fluorescence. It seems most likely that the substrate reacts with the process gases through both processes similar to reactive sputtering and CVD to form silane and other silicon bearing compounds before being deposited isotropically as a SiNx coating onto the VACNFs. The case for the presence of Si-NCs is made strong through a combination of the strong fluorescence and elemental analysis of the samples. These broadly luminescent fibers can prove useful as registry markers in fluorescent cellular studies.« less

  16. Amorphous silicon as high index photonic material

    NASA Astrophysics Data System (ADS)

    Lipka, T.; Harke, A.; Horn, O.; Amthor, J.; Müller, J.

    2009-05-01

    Silicon-on-Insulator (SOI) photonics has become an attractive research topic within the area of integrated optics. This paper aims to fabricate SOI-structures for optical communication applications with lower costs compared to standard fabrication processes as well as to provide a higher flexibility with respect to waveguide and substrate material choice. Amorphous silicon is deposited on thermal oxidized silicon wafers with plasma-enhanced chemical vapor deposition (PECVD). The material is optimized in terms of optical light transmission and refractive index. Different a-Si:H waveguides with low propagation losses are presented. The waveguides were processed with CMOS-compatible fabrication technologies and standard DUV-lithography enabling high volume production. To overcome the large mode-field diameter mismatch between incoupling fiber and sub-μm waveguides three dimensional, amorphous silicon tapers were fabricated with a KOH etched shadow mask for patterning. Using ellipsometric and Raman spectroscopic measurements the material properties as refractive index, layer thickness, crystallinity and material composition were analyzed. Rapid thermal annealing (RTA) experiments of amorphous thin films and rib waveguides were performed aiming to tune the refractive index of the deposited a-Si:H waveguide core layer after deposition.

  17. Direct fabrication of 3D graphene on nanoporous anodic alumina by plasma-enhanced chemical vapor deposition

    PubMed Central

    Zhan, Hualin; Garrett, David J.; Apollo, Nicholas V.; Ganesan, Kumaravelu; Lau, Desmond; Prawer, Steven; Cervenka, Jiri

    2016-01-01

    High surface area electrode materials are of interest for a wide range of potential applications such as super-capacitors and electrochemical cells. This paper describes a fabrication method of three-dimensional (3D) graphene conformally coated on nanoporous insulating substrate with uniform nanopore size. 3D graphene films were formed by controlled graphitization of diamond-like amorphous carbon precursor films, deposited by plasma-enhanced chemical vapour deposition (PECVD). Plasma-assisted graphitization was found to produce better quality graphene than a simple thermal graphitization process. The resulting 3D graphene/amorphous carbon/alumina structure has a very high surface area, good electrical conductivity and exhibits excellent chemically stability, providing a good material platform for electrochemical applications. Consequently very large electrochemical capacitance values, as high as 2.1 mF for a sample of 10 mm3, were achieved. The electrochemical capacitance of the material exhibits a dependence on bias voltage, a phenomenon observed by other groups when studying graphene quantum capacitance. The plasma-assisted graphitization, which dominates the graphitization process, is analyzed and discussed in detail. PMID:26805546

  18. Direct fabrication of 3D graphene on nanoporous anodic alumina by plasma-enhanced chemical vapor deposition.

    PubMed

    Zhan, Hualin; Garrett, David J; Apollo, Nicholas V; Ganesan, Kumaravelu; Lau, Desmond; Prawer, Steven; Cervenka, Jiri

    2016-01-25

    High surface area electrode materials are of interest for a wide range of potential applications such as super-capacitors and electrochemical cells. This paper describes a fabrication method of three-dimensional (3D) graphene conformally coated on nanoporous insulating substrate with uniform nanopore size. 3D graphene films were formed by controlled graphitization of diamond-like amorphous carbon precursor films, deposited by plasma-enhanced chemical vapour deposition (PECVD). Plasma-assisted graphitization was found to produce better quality graphene than a simple thermal graphitization process. The resulting 3D graphene/amorphous carbon/alumina structure has a very high surface area, good electrical conductivity and exhibits excellent chemically stability, providing a good material platform for electrochemical applications. Consequently very large electrochemical capacitance values, as high as 2.1 mF for a sample of 10 mm(3), were achieved. The electrochemical capacitance of the material exhibits a dependence on bias voltage, a phenomenon observed by other groups when studying graphene quantum capacitance. The plasma-assisted graphitization, which dominates the graphitization process, is analyzed and discussed in detail.

  19. Spectroscopic Ellipsometry Studies of Thin Film a-Si:H Solar Cell Fabrication by Multichamber Deposition in the n-i-p Substrate Configuration

    NASA Astrophysics Data System (ADS)

    Dahal, Lila Raj

    Real time spectroscopic ellipsometry (RTSE), and ex-situ mapping spectroscopic ellipsometry (SE) are powerful characterization techniques capable of performance optimization and scale-up evaluation of thin film solar cells used in various photovoltaics technologies. These non-invasive optical probes employ multichannel spectral detection for high speed and provide high precision parameters that describe (i) thin film structure, such as layer thicknesses, and (ii) thin film optical properties, such as oscillator variables in analytical expressions for the complex dielectric function. These parameters are critical for evaluating the electronic performance of materials in thin film solar cells and also can be used as inputs for simulating their multilayer optical performance. In this Thesis, the component layers of thin film hydrogenated silicon (Si:H) solar cells in the n-i-p or substrate configuration on rigid and flexible substrate materials have been studied by RTSE and ex-situ mapping SE. Depositions were performed by magnetron sputtering for the metal and transparent conducting oxide contacts and by plasma enhanced chemical vapor deposition (PECVD) for the semiconductor doped contacts and intrinsic absorber layers. The motivations are first to optimize the thin film Si:H solar cell in n-i-p substrate configuration for single-junction small-area dot cells and ultimately to scale-up the optimized process to larger areas with minimum loss in device performance. Deposition phase diagrams for both i- and p -layers on 2" x 2" rigid borosilicate glass substrate were developed as functions of the hydrogen-to-silane flow ratio in PECVD. These phase diagrams were correlated with the performance parameters of the corresponding solar cells, fabricated in the Cr/Ag/ZnO/n/i/ p/ITO structure. In both cases, optimization was achieved when the layers were deposited in the protocrystalline phase. Identical solar cell structures were fabricated on 6" x 6" borosilicate glass with 256 cells followed by ex-situ mapping SE on each cell to achieve better statistics for solar cell optimization by correlating local structural parameters with solar cell parameters. Solar cells of similar structure were also fabricated on flexible polymer substrates in the roll-to-roll configuration. In this configuration as well, RTSE was demonstrated as an effective process monitoring and control tool for thin film photovoltaics.

  20. a Hadoop-Based Distributed Framework for Efficient Managing and Processing Big Remote Sensing Images

    NASA Astrophysics Data System (ADS)

    Wang, C.; Hu, F.; Hu, X.; Zhao, S.; Wen, W.; Yang, C.

    2015-07-01

    Various sensors from airborne and satellite platforms are producing large volumes of remote sensing images for mapping, environmental monitoring, disaster management, military intelligence, and others. However, it is challenging to efficiently storage, query and process such big data due to the data- and computing- intensive issues. In this paper, a Hadoop-based framework is proposed to manage and process the big remote sensing data in a distributed and parallel manner. Especially, remote sensing data can be directly fetched from other data platforms into the Hadoop Distributed File System (HDFS). The Orfeo toolbox, a ready-to-use tool for large image processing, is integrated into MapReduce to provide affluent image processing operations. With the integration of HDFS, Orfeo toolbox and MapReduce, these remote sensing images can be directly processed in parallel in a scalable computing environment. The experiment results show that the proposed framework can efficiently manage and process such big remote sensing data.

  1. High-efficiency screen-printed belt co-fired solar cells on cast multicrystalline silicon

    NASA Astrophysics Data System (ADS)

    Upadhyaya, Ajay; Sheoran, Manav; Rohatgi, Ajeet

    2005-01-01

    High-efficiency 4cm2 untextured screen-printed solar cells were achieved on cast multicrystalline silicon. These cells were fabricated using a simple manufacturable process involving POCl3 diffusion for emitter, PECVD SiNx:H deposition for a single-layer antireflection coating and rapid co-firing of Ag grid, Al backcontact, and Al-BSF in a belt furnace. An optimized process sequence contributed to effective impurity gettering and defect passivation, resulting in high average bulk lifetimes in the range of 100-250 μs after the cell processing. The contact firing contributed to good ohmic contacts with low series resistance of <1Ωcm2, low backsurface recombination velocity of <500cm/s, and high fill factors of ˜0.78. These parameters resulted in 16.9% and 16.8% efficient untextured screen-printed cells with a single layer AR coating on heat exchanger method (HEM) and Baysix mc-Si. The identical process applied to the untextured float zone wafers gave an efficiency of 17.2%. The same optimized co-firing cycle, when applied to HEM mc-Si wafers with starting lifetimes varying over a wide range of 4-70 μs, resulted in cell efficiencies in the range of 16.5%-17%.

  2. Remote semantic memory for public figures in HIV infection, alcoholism, and their comorbidity.

    PubMed

    Fama, Rosemary; Rosenbloom, Margaret J; Sassoon, Stephanie A; Thompson, Megan A; Pfefferbaum, Adolf; Sullivan, Edith V

    2011-02-01

    Impairments in component processes of working and episodic memory mark both HIV infection and chronic alcoholism, with compounded deficits often observed in individuals comorbid for these conditions. Remote semantic memory processes, however, have only seldom been studied in these diagnostic groups. Examination of remote semantic memory could provide insight into the underlying processes associated with storage and retrieval of learned information over extended time periods while elucidating spared and impaired cognitive functions in these clinical groups. We examined component processes of remote semantic memory in HIV infection and chronic alcoholism in 4 subject groups (HIV, ALC, HIV + ALC, and age-matched healthy adults) using a modified version of the Presidents Test. Free recall, recognition, and sequencing of presidential candidates and election dates were assessed. In addition, component processes of working, episodic, and semantic memory were assessed with ancillary cognitive tests. The comorbid group (HIV + ALC) was significantly impaired on sequencing of remote semantic information compared with age-matched healthy adults. Free recall of remote semantic information was also modestly impaired in the HIV + ALC group, but normal performance for recognition of this information was observed. Few differences were observed between the single diagnosis groups (HIV, ALC) and healthy adults, although examination of the component processes underlying remote semantic memory scores elicited differences between the HIV and ALC groups. Selective remote memory processes were related to lifetime alcohol consumption in the ALC group and to viral load and depression level in the HIV group. Hepatitis C diagnosis was associated with lower remote semantic memory scores in all 3 clinical groups. Education level did not account for group differences reported. This study provides behavioral support for the existence of adverse effects associated with the comorbidity of HIV infection and chronic alcoholism on selective component processes of memory function, with untoward effects exacerbated by Hepatitis C infection. The pattern of remote semantic memory function in HIV + ALC is consistent with those observed in neurological conditions primarily affecting frontostriatal pathways and suggests that remote memory dysfunction in HIV + ALC may be a result of impaired retrieval processes rather than loss of remote semantic information per se. Copyright © 2010 by the Research Society on Alcoholism.

  3. PECVD de composes de silicium sur polymeres: Etude de la premiere phase du depot

    NASA Astrophysics Data System (ADS)

    Dennler, Gilles

    Since their first introduction in the early 90's, transparent barriers against oxygen and/or water vapor permeation through polymers, such as SiO 2, are the object of increasing interest in the food and pharmaceutical packaging industries, and more recently for the encapsulation of organic-based displays. It is now well known that these thin layers possess barrier properties only if they are thicker than a certain critical thickness, dc. For example, dc is around 12 nm in the case of SiO2 on KaptonRTM PI; below this value, the measured "Oxygen Transmission Rate" (OTR, in standard cm3/m2/day/bar) is roughly the same as that of the uncoated polymer. Until now, no detailed research has been carried out to explain this observation, but a hypothesis was proposed in the literature, based on island-like growth structure of the coating for d ≤ dc. According to this hypothesis, the surface energy of the polymeric substrates is so low that the Volmer-Weber (island-coalescence) growth mode occurs. We have aimed to verify this explanation, that is, to study the initial phase of silicon-compound (SiO2 and SiN) growth on four different polymeric substrates, namely polyimide (KaptonRTM PI), polycarbonate (LexanRTM PC), polypropylene (PP), and polyethyleneterephthalate (MylarRTM PET). Three different deposition methods were used, namely reactive evaporation of SiO, radio-frequency (RF) Plasma Enhanced Chemical Vapor Deposition (RF PECVD), and Distributed Electron Cyclotron Resonance (DECR) PECVD. In this latter case, the substrates were placed in three different positions: (i) in the active glow zone, (ii) downstream, and (iii) downstream, but shielded from photon emission (e.g. VUV) from the plasma. Angle-Resolved X-Ray Photoelectron Spectroscopy (ARXPS), Rutherford Backscattering Spectroscopy (RBS), and Scanning Electron Microscopy (SEM), the latter performed after Reactive Ion Etching (RIE) by oxygen plasma, revealed that growth indeed occurs in a Volmer-Weber mode in the case of evaporated films. The island coalescence was observed to occur at d = 1.2 nm, at which point the sticking coefficient of precursor species changes drastically. Finally, we have investigated the presence of an "interphase" between deposited coatings and the polymeric substrate. (Abstract shortened by UMI.)

  4. SiC Protective Coating for Photovoltaic Retinal Prostheses

    PubMed Central

    Lei, Xin; Kane, Sheryl; Cogan, Stuart; Lorach, Henri; Galambos, Ludwig; Huie, Philip; Mathieson, Keith; Kamins, Theodore; Harris, James; Palanker, Daniel

    2016-01-01

    Objective To evaluate PECVD SiC as a protective coating for retinal prostheses and other implantable devices, and to study their failure mechanisms in vivo. Approach Retinal prostheses were implanted in rats subretinally for up to 1 year. Degradation of implants was characterized by optical and scanning electron microscopy. Dissolution rates of SiC, SiNx and thermal SiO2 were measured in accelerated soaking tests in saline at 87°C. Defects in SiC films were revealed and analyzed by selectively removing the materials underneath those defects. Main results At 87°C SiNx dissolved at 18.3±0.3nm/day, while SiO2 grown at high temperature (1000°C) dissolved at 1.04±0.08A/day. SiC films demonstrated the best stability, with no quantifiable change after 112 days. Defects in thin SiC films appeared primarily over complicated topography and rough surfaces. Significance SiC coatings demonstrating no erosion in accelerated aging test for 112 days at 87°C, equivalent to about 10 years in vivo, can offer effective protection of the implants. Photovoltaic retinal prostheses with PECVD SiC coatings exhibited effective protection from erosion during the 4-month follow-up in vivo. The optimal thickness of SiC layers is about 560nm, as defined by anti-reflective properties and by sufficient coverage to eliminate defects. PMID:27323882

  5. Osteoconductive Potential of Barrier NanoSiO2 PLGA Membranes Functionalized by Plasma Enhanced Chemical Vapour Deposition

    PubMed Central

    Terriza, Antonia; Vilches-Pérez, Jose I.; de la Orden, Emilio; Yubero, Francisco; Gonzalez-Caballero, Juan L.; González-Elipe, Agustin R.; Vilches, José; Salido, Mercedes

    2014-01-01

    The possibility of tailoring membrane surfaces with osteoconductive potential, in particular in biodegradable devices, to create modified biomaterials that stimulate osteoblast response should make them more suitable for clinical use, hopefully enhancing bone regeneration. Bioactive inorganic materials, such as silica, have been suggested to improve the bioactivity of synthetic biopolymers. An in vitro study on HOB human osteoblasts was performed to assess biocompatibility and bioactivity of SiO2 functionalized poly(lactide-co-glycolide) (PLGA) membranes, prior to clinical use. A 15 nm SiO2 layer was deposited by plasma enhanced chemical vapour deposition (PECVD), onto a resorbable PLGA membrane. Samples were characterized by X-ray photoelectron spectroscopy, atomic force microscopy, scanning electron microscopy, and infrared spectroscopy (FT-IR). HOB cells were seeded on sterilized test surfaces where cell morphology, spreading, actin cytoskeletal organization, and focal adhesion expression were assessed. As proved by the FT-IR analysis of samples, the deposition by PECVD of the SiO2 onto the PLGA membrane did not alter the composition and other characteristics of the organic membrane. A temporal and spatial reorganization of cytoskeleton and focal adhesions and morphological changes in response to SiO2 nanolayer were identified in our model. The novedous SiO2 deposition method is compatible with the standard sterilization protocols and reveals as a valuable tool to increase bioactivity of resorbable PLGA membranes. PMID:24883304

  6. CMUTs with High-K Atomic Layer Deposition Dielectric Material Insulation Layer

    PubMed Central

    Xu, Toby; Tekes, Coskun; Degertekin, F. Levent

    2014-01-01

    Use of high-κ dielectric, atomic layer deposition (ALD) materials as an insulation layer material for capacitive micromachined ultrasonic transducers (CMUTs) is investigated. The effect of insulation layer material and thickness on CMUT performance is evaluated using a simple parallel plate model. The model shows that both high dielectric constant and the electrical breakdown strength are important for the dielectric material, and significant performance improvement can be achieved, especially as the vacuum gap thickness is reduced. In particular, ALD hafnium oxide (HfO2) is evaluated and used as an improvement over plasma-enhanced chemical vapor deposition (PECVD) silicon nitride (SixNy) for CMUTs fabricated by a low-temperature, complementary metal oxide semiconductor transistor-compatible, sacrificial release method. Relevant properties of ALD HfO2 such as dielectric constant and breakdown strength are characterized to further guide CMUT design. Experiments are performed on parallel fabricated test CMUTs with 50-nm gap and 16.5-MHz center frequency to measure and compare pressure output and receive sensitivity for 200-nm PECVD SixNy and 100-nm HfO2 insulation layers. Results for this particular design show a 6-dB improvement in receiver output with the collapse voltage reduced by one-half; while in transmit mode, half the input voltage is needed to achieve the same maximum output pressure. PMID:25474786

  7. Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source.

    PubMed

    Kim, Ki Seok; Kim, Ki Hyun; Ji, You Jin; Park, Jin Woo; Shin, Jae Hee; Ellingboe, Albert Rogers; Yeom, Geun Young

    2017-10-19

    Depositing a barrier film for moisture protection without damage at a low temperature is one of the most important steps for organic-based electronic devices. In this study, the authors investigated depositing thin, high-quality SiN x film on organic-based electronic devices, specifically, very high-frequency (162 MHz) plasma-enhanced chemical vapor deposition (VHF-PECVD) using a multi-tile push-pull plasma source with a gas mixture of NH 3 /SiH 4 at a low temperature of 80 °C. The thin deposited SiN x film exhibited excellent properties in the stoichiometry, chemical bonding, stress, and step coverage. Thin film quality and plasma damage were investigated by the water vapor transmission rate (WVTR) and by electrical characteristics of organic light-emitting diode (OLED) devices deposited with SiN x , respectively. The thin deposited SiN x film exhibited a low WVTR of 4.39 × 10 -4  g (m 2 · day) -1 for a single thin (430 nm thick) film SiN x and the electrical characteristics of OLED devices before and after the thin SiN x film deposition on the devices did not change, which indicated no electrical damage during the deposition of SiN x on the OLED device.

  8. High-aspect-ratio, silicon oxide-enclosed pillar structures in microfluidic liquid chromatography.

    PubMed

    Taylor, Lisa C; Lavrik, Nickolay V; Sepaniak, Michael J

    2010-11-15

    The present paper discusses the ability to separate chemical species using high-aspect-ratio, silicon oxide-enclosed pillar arrays. These miniaturized chromatographic systems require smaller sample volumes, experience less flow resistance, and generate superior separation efficiency over traditional packed bed liquid chromatographic columns, improvements controlled by the increased order and decreased pore size of the systems. In our distinctive fabrication sequence, plasma-enhanced chemical vapor deposition (PECVD) of silicon oxide is used to alter the surface and structural properties of the pillars for facile surface modification while improving the pillar mechanical stability and increasing surface area. The separation behavior of model compounds within our pillar systems indicated an unexpected hydrophobic-like separation mechanism. The effects of organic modifier, ionic concentration, and pressure-driven flow rate were studied. A decrease in the organic content of the mobile phase increased peak resolution while detrimentally effecting peak shape. A resolution of 4.7 (RSD = 3.7%) was obtained for nearly perfect Gaussian shaped peaks, exhibiting plate heights as low as 1.1 and 1.8 μm for fluorescein and sulforhodamine B, respectively. Contact angle measurements and DART mass spectrometry analysis indicate that our employed elastomeric soft bonding technique modifies pillar properties, creating a fortuitous stationary phase. This discovery provides evidence supporting the ability to easily functionalize PECVD oxide surfaces by gas-phase reactions.

  9. The role of the interface in germanium quantum dots: when not only size matters for quantum confinement effects.

    PubMed

    Cosentino, S; Mio, A M; Barbagiovanni, E G; Raciti, R; Bahariqushchi, R; Miritello, M; Nicotra, G; Aydinli, A; Spinella, C; Terrasi, A; Mirabella, S

    2015-07-14

    Quantum confinement (QC) typically assumes a sharp interface between a nanostructure and its environment, leading to an abrupt change in the potential for confined electrons and holes. When the interface is not ideally sharp and clean, significant deviations from the QC rule appear and other parameters beyond the nanostructure size play a considerable role. In this work we elucidate the role of the interface on QC in Ge quantum dots (QDs) synthesized by rf-magnetron sputtering or plasma enhanced chemical vapor deposition (PECVD). Through a detailed electron energy loss spectroscopy (EELS) analysis we investigated the structural and chemical properties of QD interfaces. PECVD QDs exhibit a sharper interface compared to sputter ones, which also evidences a larger contribution of mixed Ge-oxide states. Such a difference strongly modifies the QC strength, as experimentally verified by light absorption spectroscopy. A large size-tuning of the optical bandgap and an increase in the oscillator strength occur when the interface is sharp. A spatially dependent effective mass (SPDEM) model is employed to account for the interface difference between Ge QDs, pointing out a larger reduction in the exciton effective mass in the sharper interface case. These results add new insights into the role of interfaces on confined systems, and open the route for reliable exploitation of QC effects.

  10. CO2 Plasma-Treated TiO2 Film as an Effective Electron Transport Layer for High-Performance Planar Perovskite Solar Cells.

    PubMed

    Wang, Kang; Zhao, Wenjing; Liu, Jia; Niu, Jinzhi; Liu, Yucheng; Ren, Xiaodong; Feng, Jiangshan; Liu, Zhike; Sun, Jie; Wang, Dapeng; Liu, Shengzhong Frank

    2017-10-04

    Perovskite solar cells (PSCs) have received great attention because of their excellent photovoltaic properties especially for the comparable efficiency to silicon solar cells. The electron transport layer (ETL) is regarded as a crucial medium in transporting electrons and blocking holes for PSCs. In this study, CO 2 plasma generated by plasma-enhanced chemical vapor deposition (PECVD) was introduced to modify the TiO 2 ETL. The results indicated that the CO 2 plasma-treated compact TiO 2 layer exhibited better surface hydrophilicity, higher conductivity, and lower bulk defect state density in comparison with the pristine TiO 2 film. The quality of the stoichiometric TiO 2 structure was improved, and the concentration of oxygen-deficiency-induced defect sites was reduced significantly after CO 2 plasma treatment for 90 s. The PSCs with the TiO 2 film treated by CO 2 plasma for 90 s exhibited simultaneously improved short-circuit current (J SC ) and fill factor. As a result, the PSC-based TiO 2 ETL with CO 2 plasma treatment affords a power conversion efficiency of 15.39%, outperforming that based on pristine TiO 2 (13.54%). These results indicate that the plasma treatment by the PECVD method is an effective approach to modify the ETL for high-performance planar PSCs.

  11. Monitoring landscape level processes using remote sensing of large plots

    Treesearch

    Raymond L. Czaplewski

    1991-01-01

    Global and regional assessaents require timely information on landscape level status (e.g., areal extent of different ecosystems) and processes (e.g., changes in land use and land cover). To measure and understand these processes at the regional level, and model their impacts, remote sensing is often necessary. However, processing massive volumes of remotely sensing...

  12. Protocol for multiple node network

    NASA Technical Reports Server (NTRS)

    Kirkham, Harold (Inventor)

    1995-01-01

    The invention is a multiple interconnected network of intelligent message-repeating remote nodes which employs an antibody recognition message termination process performed by all remote nodes and a remote node polling process performed by other nodes which are master units controlling remote nodes in respective zones of the network assigned to respective master nodes. Each remote node repeats only those messages originated in the local zone, to provide isolation among the master nodes.

  13. Protocol for multiple node network

    NASA Technical Reports Server (NTRS)

    Kirkham, Harold (Inventor)

    1994-01-01

    The invention is a multiple interconnected network of intelligent message-repeating remote nodes which employs an antibody recognition message termination process performed by all remote nodes and a remote node polling process performed by other nodes which are master units controlling remote nodes in respective zones of the network assigned to respective master nodes. Each remote node repeats only those messages originated in the local zone, to provide isolation among the master nodes.

  14. Carbon Nanofibers Synthesized on Selective Substrates for Nonvolatile Memory and 3D Electronics

    NASA Technical Reports Server (NTRS)

    Kaul, Anupama B.; Khan, Abdur R.

    2011-01-01

    A plasma-enhanced chemical vapor deposition (PECVD) growth technique has been developed where the choice of starting substrate was found to influence the electrical characteristics of the resulting carbon nanofiber (CNF) tubes. It has been determined that, if the tubes are grown on refractory metallic nitride substrates, then the resulting tubes formed with dc PECVD are also electrically conducting. Individual CNFs were formed by first patterning Ni catalyst islands using ebeam evaporation and liftoff. The CNFs were then synthesized using dc PECVD with C2H2:NH3 = [1:4] at 5 Torr and 700 C, and approximately equal to 200-W plasma power. Tubes were grown directly on degenerately doped silicon <100> substrates with resistivity rho approximately equal to 1-5 meterohm-centimeter, as well as NbTiN. The approximately equal to 200-nanometer thick refractory NbTiN deposited using magnetron sputtering had rho approximately equal to 113 microohm-centimeter and was also chemically compatible with CNF synthesis. The sample was then mounted on a 45 beveled Al holder, and placed inside a SEM (scanning electron microscope). A nanomanipulator probe stage was placed inside the SEM equipped with an electrical feed-through, where tungsten probes were used to make two-terminal electrical measurements with an HP 4156C parameter analyzer. The positive terminal nanoprobe was mechanically manipulated to physically contact an individual CNF grown directly on NbTiN as shown by the SEM image in the inset of figure (a), while the negative terminal was grounded to the substrate. This revealed the tube was electrically conductive, although measureable currents could not be detected until approximately equal to 6 V, after which point current increased sharply until compliance (approximately equal to 50 nA) was reached at approximately equal to 9.5 V. A native oxide on the tungsten probe tips may contribute to a tunnel barrier, which could be the reason for the suppressed transport at low biases. Currents up to approximately 100 nA could be cycled, which are likely to propagate via the tube surface, or sidewalls, rather than the body, which is shown by the I-V in figure (a). Electrical conduction via the sidewalls is a necessity for dc NEMS (nanoelectromechanical system) applications, more so than for the field emission applications of such tubes. During the tests, high conductivity was expected, because both probes were shorted to the substrate, as shown by curve 1 in the I-V characteristic in figure (b). When a tube grown on NbTiN was probed, the response was similar to the approximately equal to 100 nA and is represented by curve 2 in figure (b), which could be cycled and propagated via the tube surface or the sidewalls. However, no measureable currents for the tube grown directly on Si were observed as shown by curve 3 in figure (b), even after testing over a range of samples. This could arise from a dielectric coating on the sidewalls for tubes on Si. As a result of the directional nature of ion bombardment during dc PECVD, Si from the substrate is likely re-sputtered and possibly coats the sidewalls.

  15. Research on remote sensing image pixel attribute data acquisition method in AutoCAD

    NASA Astrophysics Data System (ADS)

    Liu, Xiaoyang; Sun, Guangtong; Liu, Jun; Liu, Hui

    2013-07-01

    The remote sensing image has been widely used in AutoCAD, but AutoCAD lack of the function of remote sensing image processing. In the paper, ObjectARX was used for the secondary development tool, combined with the Image Engine SDK to realize remote sensing image pixel attribute data acquisition in AutoCAD, which provides critical technical support for AutoCAD environment remote sensing image processing algorithms.

  16. Chemical changes in DMP1-null murine bone & silica based pecvd coatings for titanium implant osseoapplications

    NASA Astrophysics Data System (ADS)

    Maginot, Megen

    In order to improve clinical outcomes in bone-implant systems, a thorough understanding of both local bone chemistry and implant surface chemistry is necessary. This study consists, therefore, of two main parts: one focused on determining the nature of the changes in bone chemistry in a DMP1-null transgenic disease model and the other on the development of amorphous silica-based coatings for potential use as titanium bone implant coatings. For the study of bone mineral in the DMP1 transgenic model, which is known to have low serum phosphate levels, transgenic DMP1-null and wild type mice were fed a high phosphate diet, sacrificed, and had their long bone harvested. This bone was characterized using SEM, FTIR, microCT and XANES and compared to DMP1-null and wild type control groups to assess the therapeutic effect of high Pi levels on the phenotype and the role of DMP1 in mineralization in vivo. Findings suggest that though the high phosphate diet results in restoring serum phosphate levels, it does not completely rescue the bone mineral phenotype at an ultrastructural level and implicates DMP1 in phosphate nucleation. Since plasma enhanced chemical vapor deposition (PECVD) silica like coatings have not previously been fabricated for use in oessoapplications, the second part of this study initially focused on the characterization of novel SiOx chemistries fabricated via a chemical vapor deposition process that were designed specifically to act as bioactive coatings with a loose, hydrogenated structure. These coatings were then investigated for their potential initial stage response to bone tissue through immersion in a simulated body fluid and through the culture of MC3T3 cells on the coating surfaces. Coating surfaces were characterized by SEM, FTIR, contact angle measurements, and XANES. Coating dissolution and ionic release were also investigated by ICP-OES. Findings suggest that some SiOx chemistries may form a bioactive coating while more highly substituted chemistries may form a bioresorbable coating, similar to commercially available bioactive glasses.

  17. Significance of a Noble Metal Nanolayer on the UV and Visible Light Photocatalytic Activity of Anatase TiO2 Thin Films Grown from a Scalable PECVD/PVD Approach.

    PubMed

    Baba, Kamal; Bulou, Simon; Quesada-Gonzalez, Miguel; Bonot, Sébastien; Collard, Delphine; Boscher, Nicolas D; Choquet, Patrick

    2017-11-29

    UV and visible light photocatalytic composite Pt and Au-TiO 2 coatings have been deposited on silicon and glass substrates at low temperature using a hybrid ECWR-PECVD/MS-PVD process. Methylene blue, stearic acid, and sulfamethoxazole were used as dye, organic, and antibiotic model pollutants, respectively, to demonstrate the efficiency of these nanocomposite coatings for water decontamination or self-cleaning surfaces applications. Raman investigations revealed the formation of anatase polymorph of TiO 2 in all synthesized coatings with a shifting of the main vibrational mode peak to higher wavenumber in the case of Au-TiO 2 coating, indicating an increase number of crystalline defects within this coating. Because of the difference of the chemical potentials of each of the investigated noble metals, the sputtered metal layers exhibit different morphology. Pt sputtered atoms, with high surface adhesion, promote formation of a smooth 2D layer. On the other hand, Au sputtered atoms with higher cohesive forces promote the formation of 5-10 nm nanoparticles. As a result, the surface plasmon resonance phenomenon was observed in the Au-TiO 2 coatings. UV photoactivity of the nanocomposite coatings was enhanced 1.5-3 times and 1.3 times for methylene blue and stearic acid, respectively, thanks to the enhancement of electron trapping in the noble metal layer. This electron trapping phenomenon is higher in the Pt-TiO 2 coating because of its larger work function. On the other hand, the enhancement of the visible photoactivity was more pronounced (3 and 7 times for methylene blue and stearic acid, respectively) in the case of Au-TiO 2 thanks to the surface plasmon resonance. Finally, these nanocomposite TiO 2 coatings exhibited also a good ability for the degradation of antibiotics usually found in wastewater such as sulfamethoxazole. However, a complementary test have showed an increase of the toxicity of the liquid medium after photocatalysis, which could be due the presence of sulfamethoxazole's transformation byproducts.

  18. Fabrication technology of CNT-Nickel Oxide based planar pseudocapacitor for MEMS and NEMS

    NASA Astrophysics Data System (ADS)

    Lebedev, E. A.; Kitsyuk, E. P.; Gavrilin, I. M.; Gromov, D. G.; Gruzdev, N. E.; Gavrilov, S. A.; Dronov, A. A.; Pavlov, A. A.

    2015-11-01

    Fabrication technology of planar pseudocapacitor (PsC) based on carbon nanotube (CNT) forest, synthesized using plasma enhanced chemical vapor deposition (PECVD) method, covered with thin nickel oxide layer deposited by successive ionic layer adsorption and reaction (SILAR) method, is demonstrated. Dependences of deposited oxide layers thickness on device specific capacities is studied. It is shown that pseudocapacity of nickel oxide thin layer increases specific capacity of the CNT's based device up to 2.5 times.

  19. Heteroepitaxial Diamond Growth

    DTIC Science & Technology

    1993-01-12

    Si(1 11) = CH2F + H-Si(l 11) 12 20 3 These results and similar results for gas phase reactions involving CHxF4_x species with SilH3 suggest a modified...absent in the signal from diamond.7,8 Glassy carbon also exhibits spectral characteristics similar to those of graphite. 7 The diamond substrate laser...PECVD on Si(100) using an acetic acid/water/methanol mixture at 0.5 Torr and 350 C, similar to results described elsewhere 3. For comparison, a

  20. Remote sensing in the coastal and marine environment. Proceedings of the US North Atlantic Regional Workshop

    NASA Technical Reports Server (NTRS)

    Zaitzeff, J. B. (Editor); Cornillon, P. (Editor); Aubrey, D. A. (Editor)

    1980-01-01

    Presentations were grouped in the following categories: (1) a technical orientation of Earth resources remote sensing including data sources and processing; (2) a review of the present status of remote sensing technology applicable to the coastal and marine environment; (3) a description of data and information needs of selected coastal and marine activities; and (4) an outline of plans for marine monitoring systems for the east coast and a concept for an east coast remote sensing facility. Also discussed were user needs and remote sensing potentials in the areas of coastal processes and management, commercial and recreational fisheries, and marine physical processes.

  1. Release of MEMS devices with hard-baked polyimide sacrificial layer

    NASA Astrophysics Data System (ADS)

    Boroumand Azad, Javaneh; Rezadad, Imen; Nath, Janardan; Smith, Evan; Peale, Robert E.

    2013-03-01

    Removal of polyimides used as sacrificial layer in fabricating MEMS devices can be challenging after hardbaking, which may easily result by the end of multiple-step processing. We consider the specific commercial co-developable polyimide ProLift 100 (Brewer Science). Excessive heat hardens this material, so that during wet release in TMAH based solvents, intact sheets break free from the substrate, move around in the solution, and break delicate structures. On the other hand, dry reactive-ion etching of hard-baked ProLift is so slow, that MEMS structures are damaged from undesirably-prolonged physical bombardment by plasma ions. We found that blanket exposure to ultraviolet light allows rapid dry etch of the ProLift surrounding the desired structures without damaging them. Subsequent removal of ProLift from under the devices can then be safely performed using wet or dry etch. We demonstrate the approach on PECVD-grown silicon-oxide cantilevers of 100 micron × 100 micron area supported 2 microns above the substrate by ~100-micron-long 8-micron-wide oxide arms.

  2. Influence of Deposition Pressure on the Properties of Round Pyramid Textured a-Si:H Solar Cells for Maglev.

    PubMed

    Lee, Jaehyeong; Choi, Wonseok; Lee, Kyuil; Lee, Daedong; Kang, Hyunil

    2016-05-01

    HIT (Heterojunction with Intrinsic Thin-layer) photovoltaic cells is one of the highest efficiencies in the commercial solar cells. The pyramid texturization for reducing surface reflectance of HIT solar cells silicon wafers is widely used. For the low leakage current and high shunt of solar cells, the intrinsic amorphous silicon (a-Si:H) on substrate must be uniformly thick of pyramid structure. However, it is difficult to control the thickness in the traditional pyramid texturing process. Thus, we textured the intrinsic a-Si:H thin films with the round pyramidal structure by using HNO3, HF, and CH3COOH solution. The characteristics of round pyramid a-Si:H solar cells deposited at pressure of 500, 1000, 1500, and 2000 mTorr by PECVD (Plasma Enhanced Chemical Vapor Deposition) was investigated. The lifetime, open circuit voltage, fill factor and efficiency of a-Si:H solar cells were investigated with respect to various deposition pressure.

  3. The influence of the PCF scattering on the electrical properties of the AlGaN/AlN/GaN HEMTs after the Si3N4 surface passivation

    NASA Astrophysics Data System (ADS)

    Fu, Chen; Lin, Zhaojun; Cui, Peng; Lv, Yuanjie; Zhou, Yang; Dai, Gang; Luan, Chongbiao; Liu, Huan; Cheng, Aijie

    2018-04-01

    In this paper, the detailed device characteristics were investigated both before and after the Si3N4 passivation grown by plasma-enhanced chemical vapor deposition (PECVD). Better transport properties have been observed for the passivated devices compared with the same ones before passivation. The strain variation and the influence of the scattering mechanisms were analyzed and studied. The calculated results show that the non-uniform distribution of the additional polarization charges at the AlGaN/AlN/GaN interfaces has been weakened by the deposition of the Si3N4 layer. The numerical rise of the two-dimensional electron gas (2DEG) electron mobility and the decrease of the measured R on- A values were in a good consistency, and the weakening of the polarization Coulomb field (PCF) scattering after the passivation process is considered to be the main cause of these phenomena.

  4. High performance SONOS flash memory with in-situ silicon nanocrystals embedded in silicon nitride charge trapping layer

    NASA Astrophysics Data System (ADS)

    Lim, Jae-Gab; Yang, Seung-Dong; Yun, Ho-Jin; Jung, Jun-Kyo; Park, Jung-Hyun; Lim, Chan; Cho, Gyu-seok; Park, Seong-gye; Huh, Chul; Lee, Hi-Deok; Lee, Ga-Won

    2018-02-01

    In this paper, SONOS-type flash memory device with highly improved charge-trapping efficiency is suggested by using silicon nanocrystals (Si-NCs) embedded in silicon nitride (SiNX) charge trapping layer. The Si-NCs were in-situ grown by PECVD without additional post annealing process. The fabricated device shows high program/erase speed and retention property which is suitable for multi-level cell (MLC) application. Excellent performance and reliability for MLC are demonstrated with large memory window of ∼8.5 V and superior retention characteristics of 7% charge loss for 10 years. High resolution transmission electron microscopy image confirms the Si-NC formation and the size is around 1-2 nm which can be verified again in X-ray photoelectron spectroscopy (XPS) where pure Si bonds increase. Besides, XPS analysis implies that more nitrogen atoms make stable bonds at the regular lattice point. Photoluminescence spectra results also illustrate that Si-NCs formation in SiNx is an effective method to form deep trap states.

  5. The future of remote ECG monitoring systems.

    PubMed

    Guo, Shu-Li; Han, Li-Na; Liu, Hong-Wei; Si, Quan-Jin; Kong, De-Feng; Guo, Fu-Su

    2016-09-01

    Remote ECG monitoring systems are becoming commonplace medical devices for remote heart monitoring. In recent years, remote ECG monitoring systems have been applied in the monitoring of various kinds of heart diseases, and the quality of the transmission and reception of the ECG signals during remote process kept advancing. However, there remains accompanying challenges. This report focuses on the three components of the remote ECG monitoring system: patient (the end user), the doctor workstation, and the remote server, reviewing and evaluating the imminent challenges on the wearable systems, packet loss in remote transmission, portable ECG monitoring system, patient ECG data collection system, and ECG signals transmission including real-time processing ST segment, R wave, RR interval and QRS wave, etc. This paper tries to clarify the future developmental strategies of the ECG remote monitoring, which can be helpful in guiding the research and development of remote ECG monitoring.

  6. Room-Temperature-Processed Flexible Amorphous InGaZnO Thin Film Transistor.

    PubMed

    Xiao, Xiang; Zhang, Letao; Shao, Yang; Zhou, Xiaoliang; He, Hongyu; Zhang, Shengdong

    2017-12-13

    A room-temperature flexible amorphous indium-gallium-zinc oxide thin film transistor (a-IGZO TFT) technology is developed on plastic substrates, in which both the gate dielectric and passivation layers of the TFTs are formed by an anodic oxidation (anodization) technique. While the gate dielectric Al 2 O 3 is grown with a conventional anodization on an Al:Nd gate electrode, the channel passivation layer Al 2 O 3 is formed using a localized anodization technique. The anodized Al 2 O 3 passivation layer shows a superior passivation effect to that of PECVD SiO 2 . The room-temperature-processed flexible a-IGZO TFT exhibits a field-effect mobility of 7.5 cm 2 /V·s, a subthreshold swing of 0.44 V/dec, an on-off ratio of 3.1 × 10 8 , and an acceptable gate-bias stability with threshold voltage shifts of 2.65 and -1.09 V under positive gate-bias stress and negative gate-bias stress, respectively. Bending and fatigue tests confirm that the flexible a-IGZO TFT also has a good mechanical reliability, with electrical performances remaining consistent up to a strain of 0.76% as well as after 1200 cycles of fatigue testing.

  7. Barrier SiO2-like coatings for archaeological artefacts preservation

    NASA Astrophysics Data System (ADS)

    Prochazka, M.; Blahova, L.; Krcma, F.

    2016-10-01

    Thin film chemical vapour deposition technique has been used for more than 50 years. Introducing organo-silicones as precursors, e.g. hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS), brought new possibilities to this method. Barrier properties of thin films have become an important issue, especially for army and emergency services as well as for food and drink manufacturers. Our work is focused on protective HMDSO thin films for encapsulating cleaned archaeological artefacts, preventing the corrosion from destroying these historical items.Thin films are deposited via plasma enhanced chemical vapour deposition (PECVD) technique using low pressure capacitively coupled pasma in flow regime. Oxygen transmission rate (OTR) measurement was chosen as the most important one for characterization of barrier properties of deposited thin films. Lowest OTR reached for 50 nm thin film thickness was 120 cm3 m-2 atm-1 day-1. Samples were also analyzed by Fourier Transform Infrared spectrometry (FTIR) to determine their composition. Optical emission spectra and thin film thickness were measured during the deposition process. We optimized the deposition parameters for barrier layers by implementation of pulsed mode of plasma and argon plasma pre-treatment into the process.

  8. Low temperature RF plasma nitriding of self-organized TiO2 nanotubes for effective bandgap reduction

    NASA Astrophysics Data System (ADS)

    Bonelli, Thiago Scremin; Pereyra, Inés

    2018-06-01

    Titanium dioxide is a widely studied semiconductor material found in many nanostructured forms, presenting very interesting properties for several applications, particularly photocatalysis. TiO2 nanotubes have a high surface-to-volume ratio and functional electronic properties for light harvesting. Despite these manifold advantages, TiO2 photocatalytic activity is limited to UV radiation due to its large band gap. In this work, TiO2 nanotubes produced by electrochemical anodization were submitted to plasma nitriding processes in a PECVD reactor. The plasma parameters were evaluated to find the best conditions for gap reduction, in order to increase their photocatalytic activity. The pressure and RF power density were varied from 0.66 to 2.66 mbar and 0.22 to 3.51 W/cm2 respectively. The best gap reduction, to 2.80 eV, was achieved using a pressure of 1.33 mbar and 1.75 W/cm2 RF power at 320 °C, during a 2-h process. This leads to a 14% reduction in the band gap value and an increase of 25.3% in methylene blue reduction, doubling the range of solar photons absorption from 5 to 10% of the solar spectrum.

  9. Integration of amorphous tantalum silicon nitride (TaSiN) films as diffusion barriers in a Cu/SiLK(TM) metallization scheme

    NASA Astrophysics Data System (ADS)

    Padiyar, Sumant Devdas

    2003-09-01

    Current and future performance requirements for high- speed integrated circuit (IC) devices have placed great emphasis on the introduction of novel materials, deposition techniques and improved metrology techniques. The introduction of copper interconnects and more currently low-k dielectric materials in IC fabrication are two such examples. This introduction necessitates research on the compatibility of these materials and process techniques with adjacent diffusion barrier materials. One candidate, which has attracted significant attention is tantalum-silicon-nitride (TaSiN) on account of its superior diffusion barrier performance and high recrystallization temperature1. The subject of this dissertation is an investigation of the integration compatibility and performance of TaSiN barrier layers with a low-k dielectric polymer (SiLK ®2). A plasma- enhanced chemical vapor deposition (PECVD) approach is taken for growth of TaSiN films in this work due to potential advantages in conformal film coverage compared to more conventional physical vapor deposition methods. A Design of Experiment (DOE) methodology was introduced for PECVD of TaSiN on SiLK to optimize film properties such as film composition, resistivity, growth rate and film roughness with respect to the predictors viz. substrate temperature, precursor gas flow and plasma power. The first pass study determined the response window for optimized TaSiN film composition, growth rate and low halide contamination and the compatibility of the process with an organic polymer substrate, i.e. SiLK. Second-pass studies were carried out to deposit ultra- thin (10nm) films on: (a)blanket SiLK to investigate the performance of TaSiN films against copper diffusion, and (b)patterned SiLK to evaluate step coverage and conformality. All TaSiN depositions were carried out on SiO2 substrates for baseline comparisons. A second purpose of the diffusion barrier in IC processing is to improve interfacial adhesion between the barrier and the adjacent dielectric material; especially important for an organic polymer like SiLK. Hence, a detailed study was undertaken to evaluate the interfacial adhesion of TaSiN with SiLK and SiO2 and study the dependence of the adhesion with the film composition. The results of diffusion barrier performance studies, conformality studies, and interfacial adhesion studies of TaSiN films are discussed in relation to the elemental compositions of the films. 1J. S. Reid, M. Nicolet, J. Appl. Phys. 79 (2) p. 1109 (1996). 2SiLK is a low-k dielectric candidate registered by Dow Chemical Company, MI.

  10. SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH

    NASA Astrophysics Data System (ADS)

    Zhang, Xiaoxian; Myers, John N.; Huang, Huai; Shobha, Hosadurga; Chen, Zhan; Grill, Alfred

    2016-02-01

    PECVD deposited porous SiCOH with ultralow dielectric constant has been successfully integrated as the insulator in advanced interconnects to decrease the RC delay. The effects of NH3 plasma treatment and the effectiveness of the dielectric repair on molecular structures at the surface and buried interface of a pSiCOH film deposited on top of a SiCNH film on a Si wafer were fully characterized using sum frequency generation vibrational spectroscopy (SFG), supplemented by X-ray photoelectron spectroscopy. After exposure to NH3 plasma for 18 s, about 40% of the methyl groups were removed from the pSiCOH surface, and the average orientation of surface methyl groups tilted more towards the surface. The repair method used here effectively repaired the molecular structures at the pSiCOH surface but did not totally recover the entire plasma-damaged layer. Additionally, simulated SFG spectra with various average orientations of methyl groups at the SiCNH/pSiCOH buried interface were compared with the experimental SFG spectra collected using three different laser input angles to determine the molecular structural information at the SiCNH/pSiCOH buried interface after NH3 plasma treatment and repair. The molecular structures including the coverage and the average orientation of methyl groups at the buried interface were found to be unchanged by NH3 plasma treatment and repair.

  11. Metal (Ag/Ti)-Containing Hydrogenated Amorphous Carbon Nanocomposite Films with Enhanced Nanoscratch Resistance: Hybrid PECVD/PVD System and Microstructural Characteristics.

    PubMed

    Constantinou, Marios; Nikolaou, Petros; Koutsokeras, Loukas; Avgeropoulos, Apostolos; Moschovas, Dimitrios; Varotsis, Constantinos; Patsalas, Panos; Kelires, Pantelis; Constantinides, Georgios

    2018-03-30

    This study aimed to develop hydrogenated amorphous carbon thin films with embedded metallic nanoparticles (a-C:H:Me) of controlled size and concentration. Towards this end, a novel hybrid deposition system is presented that uses a combination of Plasma Enhanced Chemical Vapor Deposition (PECVD) and Physical Vapor Deposition (PVD) technologies. The a-C:H matrix was deposited through the acceleration of carbon ions generated through a radio-frequency (RF) plasma source by cracking methane, whereas metallic nanoparticles were generated and deposited using terminated gas condensation (TGC) technology. The resulting material was a hydrogenated amorphous carbon film with controlled physical properties and evenly dispersed metallic nanoparticles (here Ag or Ti). The physical, chemical, morphological and mechanical characteristics of the films were investigated through X-ray reflectivity (XRR), Raman spectroscopy, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), Transmission Electron Microscopy (TEM) and nanoscratch testing. The resulting amorphous carbon metal nanocomposite films (a-C:H:Ag and a-C:H:Ti) exhibited enhanced nanoscratch resistance (up to +50%) and low values of friction coefficient (<0.05), properties desirable for protective coatings and/or solid lubricant applications. The ability to form nanocomposite structures with tunable coating performance by potentially controlling the carbon bonding, hydrogen content, and the type/size/percent of metallic nanoparticles opens new avenues for a broad range of applications in which mechanical, physical, biological and/or combinatorial properties are required.

  12. Environmental analysis using integrated GIS and remotely sensed data - Some research needs and priorities

    NASA Technical Reports Server (NTRS)

    Davis, Frank W.; Quattrochi, Dale A.; Ridd, Merrill K.; Lam, Nina S.-N.; Walsh, Stephen J.

    1991-01-01

    This paper discusses some basic scientific issues and research needs in the joint processing of remotely sensed and GIS data for environmental analysis. Two general topics are treated in detail: (1) scale dependence of geographic data and the analysis of multiscale remotely sensed and GIS data, and (2) data transformations and information flow during data processing. The discussion of scale dependence focuses on the theory and applications of spatial autocorrelation, geostatistics, and fractals for characterizing and modeling spatial variation. Data transformations during processing are described within the larger framework of geographical analysis, encompassing sampling, cartography, remote sensing, and GIS. Development of better user interfaces between image processing, GIS, database management, and statistical software is needed to expedite research on these and other impediments to integrated analysis of remotely sensed and GIS data.

  13. Needs Assessment for the Use of NASA Remote Sensing Data in the Development and Implementation of Estuarine and Coastal Water Quality Standards

    NASA Technical Reports Server (NTRS)

    Spiering, Bruce; Underwood, Lauren; Ellis, Chris; Lehrter, John; Hagy, Jim; Schaeffer, Blake

    2010-01-01

    The goals of the project are to provide information from satellite remote sensing to support numeric nutrient criteria development and to determine data processing methods and data quality requirements to support nutrient criteria development and implementation. The approach is to identify water quality indicators that are used by decision makers to assess water quality and that are related to optical properties of the water; to develop remotely sensed data products based on algorithms relating remote sensing imagery to field-based observations of indicator values; to develop methods to assess estuarine water quality, including trends, spatial and temporal variability, and seasonality; and to develop tools to assist in the development and implementation of estuarine and coastal nutrient criteria. Additional slides present process, criteria development, typical data sources and analyses for criteria process, the power of remote sensing data for the process, examples from Pensacola Bay, spatial and temporal variability, pixel matchups, remote sensing validation, remote sensing in coastal waters, requirements for remotely sensed data products, and needs assessment. An additional presentation examines group engagement and information collection. Topics include needs assessment purpose and objectives, understanding water quality decision making, determining information requirements, and next steps.

  14. Proceedings of the Eleventh International Symposium on Remote Sensing of Environment, volume 2. [application and processing of remotely sensed data

    NASA Technical Reports Server (NTRS)

    1977-01-01

    Application and processing of remotely sensed data are discussed. Areas of application include: pollution monitoring, water quality, land use, marine resources, ocean surface properties, and agriculture. Image processing and scene analysis are described along with automated photointerpretation and classification techniques. Data from infrared and multispectral band scanners onboard LANDSAT satellites are emphasized.

  15. Fully Engaging Students in the Remote Sensing Process through Field Experience

    ERIC Educational Resources Information Center

    Rundquist, Bradley C.; Vandeberg, Gregory S.

    2013-01-01

    Field data collection is often crucial to the success of investigations based upon remotely sensed data. Students of environmental remote sensing typically learn about the discipline through classroom lectures, a textbook, and computer laboratory sessions focused on the interpretation and processing of aircraft and satellite data. The importance…

  16. Comparison of approaches for mobile document image analysis using server supported smartphones

    NASA Astrophysics Data System (ADS)

    Ozarslan, Suleyman; Eren, P. Erhan

    2014-03-01

    With the recent advances in mobile technologies, new capabilities are emerging, such as mobile document image analysis. However, mobile phones are still less powerful than servers, and they have some resource limitations. One approach to overcome these limitations is performing resource-intensive processes of the application on remote servers. In mobile document image analysis, the most resource consuming process is the Optical Character Recognition (OCR) process, which is used to extract text in mobile phone captured images. In this study, our goal is to compare the in-phone and the remote server processing approaches for mobile document image analysis in order to explore their trade-offs. For the inphone approach, all processes required for mobile document image analysis run on the mobile phone. On the other hand, in the remote-server approach, core OCR process runs on the remote server and other processes run on the mobile phone. Results of the experiments show that the remote server approach is considerably faster than the in-phone approach in terms of OCR time, but adds extra delays such as network delay. Since compression and downscaling of images significantly reduce file sizes and extra delays, the remote server approach overall outperforms the in-phone approach in terms of selected speed and correct recognition metrics, if the gain in OCR time compensates for the extra delays. According to the results of the experiments, using the most preferable settings, the remote server approach performs better than the in-phone approach in terms of speed and acceptable correct recognition metrics.

  17. Research Status and Development Trend of Remote Sensing in China Using Bibliometric Analysis

    NASA Astrophysics Data System (ADS)

    Zeng, Y.; Zhang, J.; Niu, R.

    2015-06-01

    Remote sensing was introduced into China in 1970s and then began to flourish. At present, China has developed into a big remote sensing country, and remote sensing is increasingly playing an important role in various fields of national economic construction and social development. Based on China Academic Journals Full-text Database and China Citation Database published by China National Knowledge Infrastructure, this paper analyzed academic characteristics of 963 highly cited papers published by 16 professional and academic journals in the field of surveying and mapping from January 2010 to December 2014 in China, which include hot topics, literature authors, research institutions, and fundations. At the same time, it studied a total of 51,149 keywords published by these 16 journals during the same period. Firstly by keyword selection, keyword normalization, keyword consistency and keyword incorporation, and then by analysis of high frequency keywords, the progress and prospect of China's remote sensing technology in data acquisition, data processing and applications during the past five years were further explored and revealed. It can be seen that: highly cited paper analysis and word frequency analysis is complementary on subject progress analysis; in data acquisition phase, research focus is new civilian remote sensing satellite systems and UAV remote sensing system; research focus of data processing and analysis is multi-source information extraction and classification, laser point cloud data processing, objectoriented high resolution image analysis, SAR data and hyper-spectral image processing, etc.; development trend of remote sensing data processing is quantitative, intelligent, automated, and real-time, and the breadth and depth of remote sensing application is gradually increased; parallel computing, cloud computing and geographic conditions monitoring and census are the new research focuses to be paid attention to.

  18. Complementary metal-oxide semiconductor compatible source of single photons at near-visible wavelengths

    NASA Astrophysics Data System (ADS)

    Cernansky, Robert; Martini, Francesco; Politi, Alberto

    2018-02-01

    We demonstrate on chip generation of correlated pairs of photons in the near-visible spectrum using a CMOS compatible PECVD Silicon Nitride photonic device. Photons are generated via spontaneous four wave mixing enhanced by a ring resonator with high quality Q-factor of 320,000 resulting in a generation rate of 950,000 $\\frac{pairs}{mW}$. The high brightness of this source offers the opportunity to expand photonic quantum technologies over a broad wavelength range and provides a path to develop fully integrated quantum chips working at room temperature.

  19. Enhanced performance of a structured cyclo olefin copolymer-based amorphous silicon solar cell

    NASA Astrophysics Data System (ADS)

    Zhan, Xinghua; Chen, Fei; Gao, Mengyu; Tie, Shengnian; Gao, Wei

    2017-07-01

    The submicron array was fabricated onto a cyclo olefin copolymer (COC) film by a hot embossing method. An amorphous silicon p-i-n junction and transparent conductive layers were then deposited onto it through a plasma enhanced chemical vapor deposition (PECVD) and magnetron sputtering. The efficiency of the fabricated COC-based solar cell was measured and the result demonstrated 18.6% increase of the solar cell efficiency when compared to the sample without array structure. The imprinted polymer solar cells with submicron array indeed increase their efficiency.

  20. [Optical emission analyses of N2/TMG ECR plasma for deposition of GaN film].

    PubMed

    Fu, Si-Lie; Wang, Chun-An; Chen, Jun-Fang

    2013-04-01

    The optical emission spectroscopy of hybrid N2/trimethylgallium (TMG) plasma in an ECR-PECVD system was investigated. The results indicate that the TMG gas is strongly dissociated into Ga*, CH and H even under self-heating condition. Ga species and nitrogen molecule in metastable state are dominant in hybrid ECR plasma. The concentration of metastable nitrogen molecule increases with the microwave power. On the other hand, the concentration of excited nitrogen molecules and of nitrogen ion decreases when the microwave power is higher than 400 W.

  1. A High-Performance Lithium-Ion Battery Anode Based on the Core-Shell Heterostructure of Silicon-Coated Vertically Aligned Carbon Nanofibers

    DTIC Science & Technology

    2013-01-01

    nanotubes ( MWCNTs ) using chemical vapour deposition (CVD) to form a hybrid Si– MWCNT structure consisting of 54 to 57 wt% of Si.16 The initial specic...retained less than 70% aer 100 cycles.16 The wavy and partially entangled structure may still have prevented uniform Si deposition deep into the MWCNT ...silicon shells, as illustrated in Fig. 1. The VACNFs are a special type of MWCNTs which are grown with DC-biased plasma chemical vapour deposition (PECVD

  2. Methods of training the graduate level and professional geologist in remote sensing technology

    NASA Technical Reports Server (NTRS)

    Kolm, K. E.

    1981-01-01

    Requirements for a basic course in remote sensing to accommodate the needs of the graduate level and professional geologist are described. The course should stress the general topics of basic remote sensing theory, the theory and data types relating to different remote sensing systems, an introduction to the basic concepts of computer image processing and analysis, the characteristics of different data types, the development of methods for geological interpretations, the integration of all scales and data types of remote sensing in a given study, the integration of other data bases (geophysical and geochemical) into a remote sensing study, and geological remote sensing applications. The laboratories should stress hands on experience to reinforce the concepts and procedures presented in the lecture. The geologist should then be encouraged to pursue a second course in computer image processing and analysis of remotely sensed data.

  3. A high throughput geocomputing system for remote sensing quantitative retrieval and a case study

    NASA Astrophysics Data System (ADS)

    Xue, Yong; Chen, Ziqiang; Xu, Hui; Ai, Jianwen; Jiang, Shuzheng; Li, Yingjie; Wang, Ying; Guang, Jie; Mei, Linlu; Jiao, Xijuan; He, Xingwei; Hou, Tingting

    2011-12-01

    The quality and accuracy of remote sensing instruments have been improved significantly, however, rapid processing of large-scale remote sensing data becomes the bottleneck for remote sensing quantitative retrieval applications. The remote sensing quantitative retrieval is a data-intensive computation application, which is one of the research issues of high throughput computation. The remote sensing quantitative retrieval Grid workflow is a high-level core component of remote sensing Grid, which is used to support the modeling, reconstruction and implementation of large-scale complex applications of remote sensing science. In this paper, we intend to study middleware components of the remote sensing Grid - the dynamic Grid workflow based on the remote sensing quantitative retrieval application on Grid platform. We designed a novel architecture for the remote sensing Grid workflow. According to this architecture, we constructed the Remote Sensing Information Service Grid Node (RSSN) with Condor. We developed a graphic user interface (GUI) tools to compose remote sensing processing Grid workflows, and took the aerosol optical depth (AOD) retrieval as an example. The case study showed that significant improvement in the system performance could be achieved with this implementation. The results also give a perspective on the potential of applying Grid workflow practices to remote sensing quantitative retrieval problems using commodity class PCs.

  4. VHP - An environment for the remote visualization of heuristic processes

    NASA Technical Reports Server (NTRS)

    Crawford, Stuart L.; Leiner, Barry M.

    1991-01-01

    A software system called VHP is introduced which permits the visualization of heuristic algorithms on both resident and remote hardware platforms. The VHP is based on the DCF tool for interprocess communication and is applicable to remote algorithms which can be on different types of hardware and in languages other than VHP. The VHP system is of particular interest to systems in which the visualization of remote processes is required such as robotics for telescience applications.

  5. The Penn State ORSER system for processing and analyzing ERTS and other MSS data

    NASA Technical Reports Server (NTRS)

    Mcmurtry, G. J.; Petersen, G. W. (Principal Investigator); Borden, F. Y.; Weeden, H. A.

    1974-01-01

    The author has identified the following significant results. The office for Remote Sensing of Earth Resources (ORSER) of the Space Science and Engineering Laboratory at the Pennsylvania State University has developed an extensive operational system for processing and analyzing ERTS-1 and similar multispectral data. The ORSER system was developed for use by a wide variety of researchers working in remote sensing. Both photointerpretive techniques and automatic computer processing methods have been developed and used, separately and in a combined approach. A remote Job Entry system permits use of an IBM 370/168 computer from any compatible remote terminal, including equipment tied in by long distance telephone connections. An elementary cost analysis has been prepared for the processing of ERTS data.

  6. Machine processing of remotely sensed data - quantifying global process: Models, sensor systems, and analytical methods; Proceedings of the Eleventh International Symposium, Purdue University, West Lafayette, IN, June 25-27, 1985

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mengel, S.K.; Morrison, D.B.

    1985-01-01

    Consideration is given to global biogeochemical issues, image processing, remote sensing of tropical environments, global processes, geology, landcover hydrology, and ecosystems modeling. Topics discussed include multisensor remote sensing strategies, geographic information systems, radars, and agricultural remote sensing. Papers are presented on fast feature extraction; a computational approach for adjusting TM imagery terrain distortions; the segmentation of a textured image by a maximum likelihood classifier; analysis of MSS Landsat data; sun angle and background effects on spectral response of simulated forest canopies; an integrated approach for vegetation/landcover mapping with digital Landsat images; geological and geomorphological studies using an image processing technique;more » and wavelength intensity indices in relation to tree conditions and leaf-nutrient content.« less

  7. Enhancing the Teaching of Digital Processing of Remote Sensing Image Course through Geospatial Web Processing Services

    NASA Astrophysics Data System (ADS)

    di, L.; Deng, M.

    2010-12-01

    Remote sensing (RS) is an essential method to collect data for Earth science research. Huge amount of remote sensing data, most of them in the image form, have been acquired. Almost all geography departments in the world offer courses in digital processing of remote sensing images. Such courses place emphasis on how to digitally process large amount of multi-source images for solving real world problems. However, due to the diversity and complexity of RS images and the shortcomings of current data and processing infrastructure, obstacles for effectively teaching such courses still remain. The major obstacles include 1) difficulties in finding, accessing, integrating and using massive RS images by students and educators, and 2) inadequate processing functions and computing facilities for students to freely explore the massive data. Recent development in geospatial Web processing service systems, which make massive data, computing powers, and processing capabilities to average Internet users anywhere in the world, promises the removal of the obstacles. The GeoBrain system developed by CSISS is an example of such systems. All functions available in GRASS Open Source GIS have been implemented as Web services in GeoBrain. Petabytes of remote sensing images in NASA data centers, the USGS Landsat data archive, and NOAA CLASS are accessible transparently and processable through GeoBrain. The GeoBrain system is operated on a high performance cluster server with large disk storage and fast Internet connection. All GeoBrain capabilities can be accessed by any Internet-connected Web browser. Dozens of universities have used GeoBrain as an ideal platform to support data-intensive remote sensing education. This presentation gives a specific example of using GeoBrain geoprocessing services to enhance the teaching of GGS 588, Digital Remote Sensing taught at the Department of Geography and Geoinformation Science, George Mason University. The course uses the textbook "Introductory Digital Image Processing, A Remote Sensing Perspective" authored by John Jensen. The textbook is widely adopted in the geography departments around the world for training students on digital processing of remote sensing images. In the traditional teaching setting for the course, the instructor prepares a set of sample remote sensing images to be used for the course. Commercial desktop remote sensing software, such as ERDAS, is used for students to do the lab exercises. The students have to do the excurses in the lab and can only use the simple images. For this specific course at GMU, we developed GeoBrain-based lab excurses for the course. With GeoBrain, students now can explore petabytes of remote sensing images in the NASA, NOAA, and USGS data archives instead of dealing only with sample images. Students have a much more powerful computing facility available for their lab excurses. They can explore the data and do the excurses any time at any place they want as long as they can access the Internet through the Web Browser. The feedbacks from students are all very positive about the learning experience on the digital image processing with the help of GeoBrain web processing services. The teaching/lab materials and GeoBrain services are freely available to anyone at http://www.laits.gmu.edu.

  8. Brazil's remote sensing activities in the Eighties

    NASA Technical Reports Server (NTRS)

    Raupp, M. A.; Pereiradacunha, R.; Novaes, R. A.

    1985-01-01

    Most of the remote sensing activities in Brazil have been conducted by the Institute for Space Research (INPE). This report describes briefly INPE's activities in remote sensing in the last years. INPE has been engaged in research (e.g., radiance studies), development (e.g., CCD-scanners, image processing devices) and applications (e.g., crop survey, land use, mineral resources, etc.) of remote sensing. INPE is also responsible for the operation (data reception and processing) of the LANDSATs and meteorological satellites. Data acquisition activities include the development of CCD-Camera to be deployed on board the space shuttle and the construction of a remote sensing satellite.

  9. Machine processing of remotely sensed data; Proceedings of the Conference, Purdue University, West Lafayette, Ind., October 16-18, 1973

    NASA Technical Reports Server (NTRS)

    1973-01-01

    Topics discussed include the management and processing of earth resources information, special-purpose processors for the machine processing of remotely sensed data, digital image registration by a mathematical programming technique, the use of remote-sensor data in land classification (in particular, the use of ERTS-1 multispectral scanning data), the use of remote-sensor data in geometrical transformations and mapping, earth resource measurement with the aid of ERTS-1 multispectral scanning data, the use of remote-sensor data in the classification of turbidity levels in coastal zones and in the identification of ecological anomalies, the problem of feature selection and the classification of objects in multispectral images, the estimation of proportions of certain categories of objects, and a number of special systems and techniques. Individual items are announced in this issue.

  10. Fabrication and characterization of multi-stopband Fabry-Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology

    NASA Astrophysics Data System (ADS)

    Shen, Yannan; Istock, André; Zaman, Anik; Woidt, Carsten; Hillmer, Hartmut

    2018-05-01

    Miniaturization of optical spectrometers can be achieved by Fabry-Pérot (FP) filter arrays. Each FP filter consists of two parallel highly reflecting mirrors and a resonance cavity in between. Originating from different individual cavity heights, each filter transmits a narrow spectral band (transmission line) with different wavelengths. Considering the fabrication efficiency, plasma enhanced chemical vapor deposition (PECVD) technology is applied to implement the high-optical-quality distributed Bragg reflectors (DBRs), while substrate conformal imprint lithography (one type of nanoimprint technology) is utilized to achieve the multiple cavities in just a single step. The FP filter array fabricated by nanoimprint combined with corresponding detector array builds a so-called "nanospectrometer". However, the silicon nitride and silicon dioxide stacks deposited by PECVD result in a limited stopband width of DBR (i.e., < 100 nm), which then limits the sensing range of filter arrays. However, an extension of the spectral range of filter arrays is desired and the topic of this investigation. In this work, multiple DBRs with different central wavelengths (λ c) are structured, deposited, and combined on a single substrate to enlarge the entire stopband. Cavity arrays are successfully aligned and imprinted over such terrace like surface in a single step. With this method, small chip size of filter arrays can be preserved, and the fabrication procedure of multiple resonance cavities is kept efficient as well. The detecting range of filter arrays is increased from roughly 50 nm with single DBR to 163 nm with three different DBRs.

  11. Research on fast Fourier transforms algorithm of huge remote sensing image technology with GPU and partitioning technology.

    PubMed

    Yang, Xue; Li, Xue-You; Li, Jia-Guo; Ma, Jun; Zhang, Li; Yang, Jan; Du, Quan-Ye

    2014-02-01

    Fast Fourier transforms (FFT) is a basic approach to remote sensing image processing. With the improvement of capacity of remote sensing image capture with the features of hyperspectrum, high spatial resolution and high temporal resolution, how to use FFT technology to efficiently process huge remote sensing image becomes the critical step and research hot spot of current image processing technology. FFT algorithm, one of the basic algorithms of image processing, can be used for stripe noise removal, image compression, image registration, etc. in processing remote sensing image. CUFFT function library is the FFT algorithm library based on CPU and FFTW. FFTW is a FFT algorithm developed based on CPU in PC platform, and is currently the fastest CPU based FFT algorithm function library. However there is a common problem that once the available memory or memory is less than the capacity of image, there will be out of memory or memory overflow when using the above two methods to realize image FFT arithmetic. To address this problem, a CPU and partitioning technology based Huge Remote Fast Fourier Transform (HRFFT) algorithm is proposed in this paper. By improving the FFT algorithm in CUFFT function library, the problem of out of memory and memory overflow is solved. Moreover, this method is proved rational by experiment combined with the CCD image of HJ-1A satellite. When applied to practical image processing, it improves effect of the image processing, speeds up the processing, which saves the time of computation and achieves sound result.

  12. Research on assessment and improvement method of remote sensing image reconstruction

    NASA Astrophysics Data System (ADS)

    Sun, Li; Hua, Nian; Yu, Yanbo; Zhao, Zhanping

    2018-01-01

    Remote sensing image quality assessment and improvement is an important part of image processing. Generally, the use of compressive sampling theory in remote sensing imaging system can compress images while sampling which can improve efficiency. A method of two-dimensional principal component analysis (2DPCA) is proposed to reconstruct the remote sensing image to improve the quality of the compressed image in this paper, which contain the useful information of image and can restrain the noise. Then, remote sensing image quality influence factors are analyzed, and the evaluation parameters for quantitative evaluation are introduced. On this basis, the quality of the reconstructed images is evaluated and the different factors influence on the reconstruction is analyzed, providing meaningful referential data for enhancing the quality of remote sensing images. The experiment results show that evaluation results fit human visual feature, and the method proposed have good application value in the field of remote sensing image processing.

  13. Remote-Sensing Practice and Potential

    DTIC Science & Technology

    1974-05-01

    Six essential processes that must be accomplished if use of a remote - sensing system is to result in useful information are defined as problem...to be useful in remote - sensing projects are described. An overview of the current state-of-the-art of remote sensing is presented.

  14. Researching on the process of remote sensing video imagery

    NASA Astrophysics Data System (ADS)

    Wang, He-rao; Zheng, Xin-qi; Sun, Yi-bo; Jia, Zong-ren; Wang, He-zhan

    Unmanned air vehicle remotely-sensed imagery on the low-altitude has the advantages of higher revolution, easy-shooting, real-time accessing, etc. It's been widely used in mapping , target identification, and other fields in recent years. However, because of conditional limitation, the video images are unstable, the targets move fast, and the shooting background is complex, etc., thus it is difficult to process the video images in this situation. In other fields, especially in the field of computer vision, the researches on video images are more extensive., which is very helpful for processing the remotely-sensed imagery on the low-altitude. Based on this, this paper analyzes and summarizes amounts of video image processing achievement in different fields, including research purposes, data sources, and the pros and cons of technology. Meantime, this paper explores the technology methods more suitable for low-altitude video image processing of remote sensing.

  15. The Highly Robust Electrical Interconnects and Ultrasensitive Biosensors Based on Embedded Carbon Nanotube Arrays

    NASA Technical Reports Server (NTRS)

    Li, Jun; Cassell, Alan; Koehne, Jessica; Chen, Hua; Ng, Hou Tee; Ye, Qi; Stevens, Ramsey; Han, Jie; Meyyappan, M.

    2003-01-01

    We report on our recent breakthroughs in two different applications using well-aligned carbon nanotube (CNT) arrays on Si chips, including (1) a novel processing solution for highly robust electrical interconnects in integrated circuit manufacturing, and (2) the development of ultrasensitive electrochemical DNA sensors. Both of them rely on the invention of a bottom-up fabrication scheme which includes six steps, including: (a) lithographic patterning, (b) depositing bottom conducting contacts, (c) depositing metal catalysts, (d) CNT growth by plasma enhanced chemical vapor deposition (PECVD), (e) dielectric gap-filling, and (f) chemical mechanical polishing (CMP). Such processes produce a stable planarized surface with only the open end of CNTs exposed, whch can be further processed or modified for different applications. By depositing patterned top contacts, the CNT can serve as vertical interconnects between the two conducting layers. This method is fundamentally different fiom current damascene processes and avoids problems associated with etching and filling of high aspect ratio holes at nanoscales. In addition, multiwalled CNTs (MWCNTs) are highly robust and can carry a current density of 10(exp 9) A/square centimeters without degradation. It has great potential to help extending the current Si technology. The embedded MWCNT array without the top contact layer can be also used as a nanoelectrode array in electrochemical biosensors. The cell time-constant and sensitivity can be dramatically improved. By functionalizing the tube ends with specific oligonucleotide probes, specific DNA targets can be detected with electrochemical methods down to subattomoles.

  16. Spatial information technologies for remote sensing today and tomorrow; Proceedings of the Ninth Pecora Symposium, Sioux Falls, SD, October 2-4, 1984

    NASA Technical Reports Server (NTRS)

    1984-01-01

    Topics discussed at the symposium include hardware, geographic information system (GIS) implementation, processing remotely sensed data, spatial data structures, and NASA programs in remote sensing information systems. Attention is also given GIS applications, advanced techniques, artificial intelligence, graphics, spatial navigation, and classification. Papers are included on the design of computer software for geographic image processing, concepts for a global resource information system, algorithm development for spatial operators, and an application of expert systems technology to remotely sensed image analysis.

  17. An introduction to quantitative remote sensing. [data processing

    NASA Technical Reports Server (NTRS)

    Lindenlaub, J. C.; Russell, J.

    1974-01-01

    The quantitative approach to remote sensing is discussed along with the analysis of remote sensing data. Emphasis is placed on the application of pattern recognition in numerically oriented remote sensing systems. A common background and orientation for users of the LARS computer software system is provided.

  18. The Preparation and Microstructure of Nanocrystal 3C-SiC/ZrO2 Bilayer Films

    PubMed Central

    Ye, Chao; Ran, Guang; Zhou, Wei; Qu, Yazhou; Yan, Xin; Cheng, Qijin; Li, Ning

    2017-01-01

    The nanocrystal 3C-SiC/ZrO2 bilayer films that could be used as the protective coatings of zirconium alloy fuel cladding were prepared on a single-crystal Si substrate. The corresponding nanocrystal 3C-SiC film and nanocrystal ZrO2 film were also dividedly synthesized. The microstructure of nanocrystal films was analyzed by grazing incidence X-ray diffraction (GIXRD) and cross-sectional transmission electron microscopy (TEM). The 3C-SiC film with less than 30 nm crystal size was synthesized by Plasma Enhanced Chemical Vapor Deposition (PECVD) and annealing. The corresponding formation mechanism of some impurities in SiC film was analyzed and discussed. An amorphous Zr layer about 600 nm in width was first deposited by magnetron sputtering and then oxidized to form a nanocrystal ZrO2 layer during the annealing process. The interface characteristics of 3C-SiC/ZrO2 bilayer films prepared by two different processes were obviously different. SiZr and SiO2 compounds were formed at the interface of 3C-SiC/ZrO2 bilayer films. A corrosion test of 3C-SiC/ZrO2 bilayer films was conducted to qualitatively analyze the surface corrosion resistance and the binding force of the interface. PMID:29168782

  19. Kinetic Migration of Diethylhexyl Phthalate in Functional PVC Films

    NASA Astrophysics Data System (ADS)

    Fei, Fei; Liu, Zhongwei; Chen, Qiang; Liu, Fuping

    2012-02-01

    Plasticizers that are generally used in plastics to produce flexible food packaging materials have proved to cause reproductive system problems and women's infertility. A long-term consumption may even cause cancer diseases. Hence a nano-scale layer, named as functional barrier layer, was deposited on the plastic surface to prevent plasticizer diethylhexyl phthalate's (DEHP) migration from plastics to foods. The feasibility of functional barrier layer i.e. SiOx coating through plasma enhanced chemical vapor deposition (PECVD) process was then described in this paper. We used Fourier transform infrared spectroscopy (FTIR) to analyze the chemical composition of coatings, scanning electron microscope (SEM) to explore the topography of the coating surfaces, surface profilemeter to measure thickness of coatings, and high-performance liquid chromatography (HPLC) to evaluate the barrier properties of coatings. The results have clearly shown that the coatings can perfectly block the migration of the DEHP from plastics to their containers. It is also concluded that process parameters significantly influence the block efficiency of the coatings. When the deposition conditions of SiOx coatings were optimized, i.e. 50 W of the discharge power, 4:1 of ratio of O2: HMDSO, and ca.100 nm thickness of SiOx, 71.2% of the DEHP was effectively blocked.

  20. A modified approach combining FNEA and watershed algorithms for segmenting remotely-sensed optical images

    NASA Astrophysics Data System (ADS)

    Liu, Likun

    2018-01-01

    In the field of remote sensing image processing, remote sensing image segmentation is a preliminary step for later analysis of remote sensing image processing and semi-auto human interpretation, fully-automatic machine recognition and learning. Since 2000, a technique of object-oriented remote sensing image processing method and its basic thought prevails. The core of the approach is Fractal Net Evolution Approach (FNEA) multi-scale segmentation algorithm. The paper is intent on the research and improvement of the algorithm, which analyzes present segmentation algorithms and selects optimum watershed algorithm as an initialization. Meanwhile, the algorithm is modified by modifying an area parameter, and then combining area parameter with a heterogeneous parameter further. After that, several experiments is carried on to prove the modified FNEA algorithm, compared with traditional pixel-based method (FCM algorithm based on neighborhood information) and combination of FNEA and watershed, has a better segmentation result.

  1. Annealing optimization of hydrogenated amorphous silicon suboxide film for solar cell application

    NASA Astrophysics Data System (ADS)

    Guangzhi, Jia; Honggang, Liu; Hudong, Chang

    2011-05-01

    We investigate a passivation scheme using hydrogenated amorphous silicon suboxide (a-SiOx:H) film for industrial solar cell application. The a-SiOx:H films were deposited using plasma-enhanced chemical vapor deposition (PECVD) by decomposing nitrous oxide, helium and silane at a substrate temperature of around 250 °C. An extensive study has been carried out on the effect of thermal annealing on carrier lifetime and surface recombination velocity, which affect the final output of the solar cell. Minority carrier lifetimes for the deposited a-SiOx:H films without and with the thermal annealing on 4 Ω·cm p-type float-zone silicon wafers are 270 μs and 670 μs, respectively, correlating to surface recombination velocities of 70 cm/s and 30 cm/s. Optical analysis has revealed a distinct decrease of blue light absorption in the a-SiOx:H films compared to the commonly used intrinsic amorphous silicon passivation used in solar cells. This paper also reports that the low cost and high quality passivation fabrication sequences employed in this study are suitable for industrial processes.

  2. On the Discontinuity of Polycrystalline Silicon Thin Films Realized by Aluminum-Induced Crystallization of PECVD-Deposited Amorphous Si

    NASA Astrophysics Data System (ADS)

    Pan, Qingtao; Wang, Tao; Yan, Hui; Zhang, Ming; Mai, Yaohua

    2017-04-01

    Crystallization of glass/Aluminum (50, 100, 200 nm) /hydrogenated amorphous silicon (a-Si:H) (50, 100, 200 nm) samples by Aluminum-induced crystallization (AIC) is investigated in this article. After annealing and wet etching, we found that the continuity of the polycrystalline silicon (poly-Si) thin films was strongly dependent on the double layer thicknesses. Increasing the a-Si:H/Al layer thickness ratio would improve the film microcosmic continuity. However, too thick Si layer might cause convex or peeling off during annealing. Scanning electron microscopy (SEM) and Energy Dispersive X-ray spectroscopy (EDX) are introduced to analyze the process of the peeling off. When the thickness ratio of a-Si:H/Al layer is around 1 to 1.5 and a-Si:H layer is less than 200 nm, the poly-Si film has a good continuity. Hall measurements are introduced to determine the electrical properties. Raman spectroscopy and X-ray diffraction (XRD) results show that the poly-Si film is completely crystallized and has a preferential (111) orientation.

  3. ALD Al2O3 passivation of Lg = 100 nm metamorphic InAlAs/InGaAs HEMTs with Si-doped Schottky layers on GaAs substrates

    NASA Astrophysics Data System (ADS)

    Sun, Bing; Chang, Hudong; Wang, Shengkai; Niu, Jiebin; Liu, Honggang

    2017-12-01

    In0.52Al0.48As/In0.7Ga0.3As metamorphic high-electron-mobility transistors (mHEMTs) on GaAs substrates have been demonstrated. The devices feature an epitaxial structure with Si-doped InP/In0.52Al0.48As Schottky layers, together with an atomic layer deposition (ALD) Al2O3 passivation process. In comparison to the GaAs mHEMTs with plasma enhanced chemical vapor deposition (PECVD) SiN passivation, the devices with ALD Al2O3 passivation exhibit more than one order of magnitude lower gate leakage current (Jg) and much lower contact resistance (RC) and specific contact resistivity (ρC). 100-nm gate length (Lg) In0.52Al0.48As/In0.7Ga0.3As mHEMTs with Si-doped InP/In0.52Al0.48As Schottky layers and ALD Al2O3 passivation exhibit excellent DC and RF characteristics, such as a maximum oscillation frequency (fmax) of 388.2 GHz.

  4. Nanoindentation data analysis of loading curve performed on DLC thin films: Effect of residual stress on the elasto-plastic properties

    NASA Astrophysics Data System (ADS)

    Ouchabane, M.; Dublanche-Tixier, Ch.; Dergham, D.

    2017-11-01

    The present work is a contribution to the understanding of the mechanical behavior of DLC thin films through nanoindentation tests. DLC films of different thicknesses deposited by the PECVD process on a silicon substrate contain high residual compressive stresses when they are very thin and the stresses become relatively low and more relaxed as the film thickens. These different levels of residual stress influence the values of hardness (H) and Young's modulus (E) obtained when probing the film-substrate system by nanoindentation. It is observed that the DLC layers exhibit different mechanical behaviors even when they are deposited under the same conditions. It is proposed that the compressive stress induces structural modifications resulting in modifying the elasto-plastic properties of each thin film-substrate system. Data analysis of the loading curve can provide information on the elasto-plastic properties of DLC thin films, particularly the stiffness (S) and Er2/H, as a function of residual compressive stresses. The structural changes induced by residual stresses were probed by using Raman spectroscopy and correlated to the mechanical properties.

  5. Visual gas sensors based on dye thin films and resonant waveguide gratings

    NASA Astrophysics Data System (ADS)

    Davoine, L.; Schnieper, M.; Barranco, A.; Aparicio, F. J.

    2011-05-01

    A colorimetric sensor that provides a direct visual indication of chemical contamination was developed. The detection is based on the color change of the reflected light after exposure to a gas or a liquid. The sensor is a combination of a chemically sensitive dye layer and a subwavelength grating structure. To enhance the perception of color change, a reference area sealed under a non-contaminated atmosphere is used and placed next to the sensor. The color change is clearly visible by human eyes. The device is based on photonic resonant effects; the visible color is a direct reflection of some incoming light, therefore no additional supplies are needed. This makes it usable as a standalone disposable sensor. The dye thin film is deposited by Plasma enhanced chemical vapor deposition (PECVD) on top of the subwavelength structure. The latter is made by combining a replication process of a Sol-Gel material and a thin film deposition. Lowcost fabrication and compatibility with environments where electricity cannot be used make this device very attractive for applications in hospitals, industries, with explosives and in traffic.

  6. Effect of sulfur passivation on the InP surface prior to plasma-enhanced chemical vapor deposition of SiNx

    NASA Astrophysics Data System (ADS)

    Tang, Hengjing; Wu, Xiaoli; Xu, Qinfei; Liu, Hongyang; Zhang, Kefeng; Wang, Yang; He, Xiangrong; Li, Xue; Gong, Hai Mei

    2008-03-01

    The fabrication of Au/SiNx/InP metal-insulator-semiconductor (MIS) diodes has been achieved by depositing a layer of SiNx on the (NH4)2Sx-treated n-InP. The SiNx layer was deposited at 200 °C using plasma-enhanced chemical vapor deposition (PECVD). The effect of passivation on the InP surface before and after annealing was evaluated by current-voltage (I-V) and capacitance-voltage (C-V) measurements, and Auger electron spectroscopy (AES) analysis was used to investigate the depth profiles of several atoms. The results indicate that the SiNx passivation layer exhibits good insulative characteristics. The annealing process causes distinct inter-diffusion in the SiNx/InP interface and contributes to the decrease of the fixed charge density and minimum interface state density, which are 1.96 × 1012 cm-2 and 7.41 × 1011 cm-2 eV-1, respectively. A 256 × 1 InP/InGaAs/InP heterojunction photodiode, fabricated with sulfidation and SiNx passivation layer, has good response uniformity.

  7. Hydrogenated Nano-/Micro-Crystalline Silicon Thin-Films for Thermoelectrics

    NASA Astrophysics Data System (ADS)

    Acosta, E.; Wight, N. M.; Smirnov, V.; Buckman, J.; Bennett, N. S.

    2018-06-01

    Thermoelectric technology has not yet been able to reach full-scale market penetration partly because most commercial materials employed are scarce/costly, environmentally unfriendly and in addition provide low conversion efficiency. The necessity to tackle some of these hurdles leads us to investigate the suitability of n-type hydrogenated microcrystalline silicon (μc-Si: H) in the fabrication of thermoelectric devices, produced by plasma enhanced chemical vapour deposition (PECVD), which is a mature process of proven scalability. This study reports an approach to optimise the thermoelectric power factor (PF) by varying the dopant concentration by means of post-annealing without impacting film morphology, at least for temperatures below 550°C. Results show an improvement in PF of more than 80%, which is driven by a noticeable increase of carrier mobility and Seebeck coefficient in spite of a reduction in carrier concentration. A PF of 2.08 × 10-4 W/mK2 at room temperature is reported for n-type films of 1 μm thickness, which is in line with the best values reported in recent literature for similar structures.

  8. Hydrogenated Nano-/Micro-Crystalline Silicon Thin-Films for Thermoelectrics

    NASA Astrophysics Data System (ADS)

    Acosta, E.; Wight, N. M.; Smirnov, V.; Buckman, J.; Bennett, N. S.

    2017-11-01

    Thermoelectric technology has not yet been able to reach full-scale market penetration partly because most commercial materials employed are scarce/costly, environmentally unfriendly and in addition provide low conversion efficiency. The necessity to tackle some of these hurdles leads us to investigate the suitability of n-type hydrogenated microcrystalline silicon (μc-Si: H) in the fabrication of thermoelectric devices, produced by plasma enhanced chemical vapour deposition (PECVD), which is a mature process of proven scalability. This study reports an approach to optimise the thermoelectric power factor (PF) by varying the dopant concentration by means of post-annealing without impacting film morphology, at least for temperatures below 550°C. Results show an improvement in PF of more than 80%, which is driven by a noticeable increase of carrier mobility and Seebeck coefficient in spite of a reduction in carrier concentration. A PF of 2.08 × 10-4 W/mK2 at room temperature is reported for n-type films of 1 μm thickness, which is in line with the best values reported in recent literature for similar structures.

  9. KNET - DISTRIBUTED COMPUTING AND/OR DATA TRANSFER PROGRAM

    NASA Technical Reports Server (NTRS)

    Hui, J.

    1994-01-01

    KNET facilitates distributed computing between a UNIX compatible local host and a remote host which may or may not be UNIX compatible. It is capable of automatic remote login. That is, it performs on the user's behalf the chore of handling host selection, user name, and password to the designated host. Once the login has been successfully completed, the user may interactively communicate with the remote host. Data output from the remote host may be directed to the local screen, to a local file, and/or to a local process. Conversely, data input from the keyboard, a local file, or a local process may be directed to the remote host. KNET takes advantage of the multitasking and terminal mode control features of the UNIX operating system. A parent process is used as the upper layer for interfacing with the local user. A child process is used for a lower layer for interfacing with the remote host computer, and optionally one or more child processes can be used for the remote data output. Output may be directed to the screen and/or to the local processes under the control of a data pipe switch. In order for KNET to operate, the local and remote hosts must observe a common communications protocol. KNET is written in ANSI standard C-language for computers running UNIX. It has been successfully implemented on several Sun series computers and a DECstation 3100 and used to run programs remotely on VAX VMS and UNIX based computers. It requires 100K of RAM under SunOS and 120K of RAM under DEC RISC ULTRIX. An electronic copy of the documentation is provided on the distribution medium. The standard distribution medium for KNET is a .25 inch streaming magnetic tape cartridge in UNIX tar format. It is also available on a 3.5 inch diskette in UNIX tar format. KNET was developed in 1991 and is a copyrighted work with all copyright vested in NASA. UNIX is a registered trademark of AT&T Bell Laboratories. Sun and SunOS are trademarks of Sun Microsystems, Inc. DECstation, VAX, VMS, and ULTRIX are trademarks of Digital Equipment Corporation.

  10. FIRST FLOOR PLAN OF REMOTE ANALYTICAL FACILITY (CPP627) SHOWING REMOTE ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    FIRST FLOOR PLAN OF REMOTE ANALYTICAL FACILITY (CPP-627) SHOWING REMOTE ANALYTICAL LABORATORY, DECONTAMINATION ROOM, AND MULTICURIE CELL ROOM. INL DRAWING NUMBER 200-0627-00-008-105065. ALTERNATE ID NUMBER 4272-14-102. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  11. Fundamentals and advances in the development of remote welding fabrication systems

    NASA Technical Reports Server (NTRS)

    Agapakis, J. E.; Masubuchi, K.; Von Alt, C.

    1986-01-01

    Operational and man-machine issues for welding underwater, in outer space, and at other remote sites are investigated, and recent process developments are described. Probable remote welding missions are classified, and the essential characteristics of fundamental remote welding tasks are analyzed. Various possible operational modes for remote welding fabrication are identified, and appropriate roles for humans and machines are suggested. Human operator performance in remote welding fabrication tasks is discussed, and recent advances in the development of remote welding systems are described, including packaged welding systems, stud welding systems, remotely operated welding systems, and vision-aided remote robotic welding and autonomous welding systems.

  12. Structural evolution and electronic properties of n-type doped hydrogenated amorphous silicon thin films

    NASA Astrophysics Data System (ADS)

    He, Jian; Li, Wei; Xu, Rui; Qi, Kang-Cheng; Jiang, Ya-Dong

    2011-12-01

    The relationship between structure and electronic properties of n-type doped hydrogenated amorphous silicon (a-Si:H) thin films was investigated. Samples with different features were prepared by plasma enhanced chemical vapor deposition (PECVD) at various substrate temperatures. Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy were used to evaluate the structural evolution, meanwhile, electronic-spin resonance (ESR) and optical measurement were applied to explore the electronic properties of P-doped a-Si:H thin films. Results reveal that the changes in materials structure affect directly the electronic properties and the doping efficiency of dopant.

  13. Photodetector based on carbon nanotubes

    NASA Astrophysics Data System (ADS)

    Pavlov, A.; Kitsyuk, E.; Ryazanov, R.; Timoshenkov, V.; Adamov, Y.

    2015-09-01

    Photodetector based on carbon nanotubes (CNT) was investigated. Sensors were done on quartz and silicon susbtrate. Samples of photodetectors sensors were produced by planar technology. This technology included deposition of first metal layer (Al), lithography for pads formation, etching, and formation of local catalyst area by inverse lithography. Vertically-aligned multi-wall carbon nanotubes were directly synthesized on substrate by PECVD method. I-V analysis and spectrum sensitivity of photodetector were investigated for 0.4 μm - 1.2 μm wavelength. Resistivity of CNT layers over temperature was detected in the range of -20°C to 100°C.

  14. Effect of Ge atoms on crystal structure and optoelectronic properties of hydrogenated Si-Ge films

    NASA Astrophysics Data System (ADS)

    Li, Tianwei; Zhang, Jianjun; Ma, Ying; Yu, Yunwu; Zhao, Ying

    2017-07-01

    Optoelectronic and structural properties of hydrogenated microcrystalline silicon-germanium (μc-Si1-xGex:H) alloys prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) were investigated. When the Ge atoms were predominantly incorporated in amorphous matrix, the dark and photo-conductivity decreased due to the reduced crystalline volume fraction of the Si atoms (XSi-Si) and the increased Ge dangling bond density. The photosensitivity decreased monotonously with Ge incorporation under higher hydrogen dilution condition, which was attributed to the increase in both crystallization of Ge and the defect density.

  15. Ring resonator based narrow-linewidth semiconductor lasers

    NASA Technical Reports Server (NTRS)

    Ksendzov, Alexander (Inventor)

    2005-01-01

    The present invention is a method and apparatus for using ring resonators to produce narrow linewidth hybrid semiconductor lasers. According to one embodiment of the present invention, the narrow linewidths are produced by combining the semiconductor gain chip with a narrow pass band external feedback element. The semi conductor laser is produced using a ring resonator which, combined with a Bragg grating, acts as the external feedback element. According to another embodiment of the present invention, the proposed integrated optics ring resonator is based on plasma enhanced chemical vapor deposition (PECVD) SiO.sub.2 /SiON/SiO.sub.2 waveguide technology.

  16. Carbon Nanotube Switches for Communication and Memory Applications

    NASA Technical Reports Server (NTRS)

    Kaul, Anupama B.; Epp, Larry; Wong, Eric W.; Kowalczyk, Robert

    2008-01-01

    Lateral CNT Switches: a) dc CNT switches were demonstrated to operate at low voltages, low powers and high speeds. b) RF simulations of switch in series configuration with metallized tube yielded good RF performance 1) Isolation simulated to be approx. 20 dB at 100 GHz. 2) Insertion loss simulated to be < 0.5 dB at 100 GHz. Vertical CNT Switches: a) Thermal CVD was used to mechanically constrain tubes in nanopockets; tubes not self-supporting. b) Demonstrated growth of vertically aligned arrays and single-few MWNTs using dc PECVD with Ni catalyst using optical lithography.

  17. Literature relevant to remote sensing of water quality

    NASA Technical Reports Server (NTRS)

    Middleton, E. M.; Marcell, R. F.

    1983-01-01

    References relevant to remote sensing of water quality were compiled, organized, and cross-referenced. The following general categories were included: (1) optical properties and measurement of water characteristics; (2) interpretation of water characteristics by remote sensing, including color, transparency, suspended or dissolved inorganic matter, biological materials, and temperature; (3) application of remote sensing for water quality monitoring; (4) application of remote sensing according to water body type; and (5) manipulation, processing and interpretation of remote sensing digital water data.

  18. On-Board, Real-Time Preprocessing System for Optical Remote-Sensing Imagery

    PubMed Central

    Qi, Baogui; Zhuang, Yin; Chen, He; Chen, Liang

    2018-01-01

    With the development of remote-sensing technology, optical remote-sensing imagery processing has played an important role in many application fields, such as geological exploration and natural disaster prevention. However, relative radiation correction and geometric correction are key steps in preprocessing because raw image data without preprocessing will cause poor performance during application. Traditionally, remote-sensing data are downlinked to the ground station, preprocessed, and distributed to users. This process generates long delays, which is a major bottleneck in real-time applications for remote-sensing data. Therefore, on-board, real-time image preprocessing is greatly desired. In this paper, a real-time processing architecture for on-board imagery preprocessing is proposed. First, a hierarchical optimization and mapping method is proposed to realize the preprocessing algorithm in a hardware structure, which can effectively reduce the computation burden of on-board processing. Second, a co-processing system using a field-programmable gate array (FPGA) and a digital signal processor (DSP; altogether, FPGA-DSP) based on optimization is designed to realize real-time preprocessing. The experimental results demonstrate the potential application of our system to an on-board processor, for which resources and power consumption are limited. PMID:29693585

  19. On-Board, Real-Time Preprocessing System for Optical Remote-Sensing Imagery.

    PubMed

    Qi, Baogui; Shi, Hao; Zhuang, Yin; Chen, He; Chen, Liang

    2018-04-25

    With the development of remote-sensing technology, optical remote-sensing imagery processing has played an important role in many application fields, such as geological exploration and natural disaster prevention. However, relative radiation correction and geometric correction are key steps in preprocessing because raw image data without preprocessing will cause poor performance during application. Traditionally, remote-sensing data are downlinked to the ground station, preprocessed, and distributed to users. This process generates long delays, which is a major bottleneck in real-time applications for remote-sensing data. Therefore, on-board, real-time image preprocessing is greatly desired. In this paper, a real-time processing architecture for on-board imagery preprocessing is proposed. First, a hierarchical optimization and mapping method is proposed to realize the preprocessing algorithm in a hardware structure, which can effectively reduce the computation burden of on-board processing. Second, a co-processing system using a field-programmable gate array (FPGA) and a digital signal processor (DSP; altogether, FPGA-DSP) based on optimization is designed to realize real-time preprocessing. The experimental results demonstrate the potential application of our system to an on-board processor, for which resources and power consumption are limited.

  20. Annual Symposium on Machine Processing of Remotely Sensed Data, 4th, Purdue University, West Lafayette, Ind., June 21-23, 1977, Proceedings

    NASA Technical Reports Server (NTRS)

    Morrison, D. B. (Editor); Scherer, D. J.

    1977-01-01

    Papers are presented on a variety of techniques for the machine processing of remotely sensed data. Consideration is given to preprocessing methods such as the correction of Landsat data for the effects of haze, sun angle, and reflectance and to the maximum likelihood estimation of signature transformation algorithm. Several applications of machine processing to agriculture are identified. Various types of processing systems are discussed such as ground-data processing/support systems for sensor systems and the transfer of remotely sensed data to operational systems. The application of machine processing to hydrology, geology, and land-use mapping is outlined. Data analysis is considered with reference to several types of classification methods and systems.

  1. Linear- and Repetitive Feature Detection Within Remotely Sensed Imagery

    DTIC Science & Technology

    2017-04-01

    applicable to Python or other pro- gramming languages with image- processing capabilities. 4.1 Classification machine learning The first methodology uses...remotely sensed images that are in panchromatic or true-color formats. Image- processing techniques, in- cluding Hough transforms, machine learning, and...data fusion .................................................................................................... 44 6.3 Context-based processing

  2. SUPERFUND REMOTE SENSING SUPPORT

    EPA Science Inventory

    This task provides remote sensing technical support to the Superfund program. Support includes the collection, processing, and analysis of remote sensing data to characterize hazardous waste disposal sites and their history. Image analysis reports, aerial photographs, and assoc...

  3. Application of the remote-sensing communication model to a time-sensitive wildfire remote-sensing system

    Treesearch

    Christopher D. Lippitt; Douglas A. Stow; Philip J. Riggan

    2016-01-01

    Remote sensing for hazard response requires a priori identification of sensor, transmission, processing, and distribution methods to permit the extraction of relevant information in timescales sufficient to allow managers to make a given time-sensitive decision. This study applies and demonstrates the utility of the Remote Sensing Communication...

  4. Geometric correction of synchronous scanned Operational Modular Imaging Spectrometer II hyperspectral remote sensing images using spatial positioning data of an inertial navigation system

    NASA Astrophysics Data System (ADS)

    Zhou, Xiaohu; Neubauer, Franz; Zhao, Dong; Xu, Shichao

    2015-01-01

    The high-precision geometric correction of airborne hyperspectral remote sensing image processing was a hard nut to crack, and conventional methods of remote sensing image processing by selecting ground control points to correct the images are not suitable in the correction process of airborne hyperspectral image. The optical scanning system of an inertial measurement unit combined with differential global positioning system (IMU/DGPS) is introduced to correct the synchronous scanned Operational Modular Imaging Spectrometer II (OMIS II) hyperspectral remote sensing images. Posture parameters, which were synchronized with the OMIS II, were first obtained from the IMU/DGPS. Second, coordinate conversion and flight attitude parameters' calculations were conducted. Third, according to the imaging principle of OMIS II, mathematical correction was applied and the corrected image pixels were resampled. Then, better image processing results were achieved.

  5. High speed polling protocol for multiple node network

    NASA Technical Reports Server (NTRS)

    Kirkham, Harold (Inventor)

    1995-01-01

    The invention is a multiple interconnected network of intelligent message-repeating remote nodes which employs a remote node polling process performed by a master node by transmitting a polling message generically addressed to all remote nodes associated with the master node. Each remote node responds upon receipt of the generically addressed polling message by transmitting a poll-answering informational message and by relaying the polling message to other adjacent remote nodes.

  6. Quo vadis, remote sensing. [use of satellite data for resource management

    NASA Technical Reports Server (NTRS)

    Billingsley, F. C.

    1977-01-01

    The use of satellite remote sensing data for resource management is discussed. The evaluation of the need for management data is reviewed, and some legislative programs which require the monitoring of environmental resources are summarized. Several characteristics of data used in the monitoring of dynamic processes are analyzed, and the implications of routine processing of extensive remote sensing data for the development of a new world view are considered.

  7. JOB BUILDER remote batch processing subsystem

    NASA Technical Reports Server (NTRS)

    Orlov, I. G.; Orlova, T. L.

    1980-01-01

    The functions of the JOB BUILDER remote batch processing subsystem are described. Instructions are given for using it as a component of a display system developed by personnel of the System Programming Laboratory, Institute of Space Research, USSR Academy of Sciences.

  8. Information Processing of Remote-Sensing Data.

    ERIC Educational Resources Information Center

    Berry, P. A. M.; Meadows, A. J.

    1987-01-01

    Reviews the current status of satellite remote sensing data, including problems with efficient storage and rapid retrieval of the data, and appropriate computer graphics to process images. Areas of research concerned with overcoming these problems are described. (16 references) (CLB)

  9. The integrated design and archive of space-borne signal processing and compression coding

    NASA Astrophysics Data System (ADS)

    He, Qiang-min; Su, Hao-hang; Wu, Wen-bo

    2017-10-01

    With the increasing demand of users for the extraction of remote sensing image information, it is very urgent to significantly enhance the whole system's imaging quality and imaging ability by using the integrated design to achieve its compact structure, light quality and higher attitude maneuver ability. At this present stage, the remote sensing camera's video signal processing unit and image compression and coding unit are distributed in different devices. The volume, weight and consumption of these two units is relatively large, which unable to meet the requirements of the high mobility remote sensing camera. This paper according to the high mobility remote sensing camera's technical requirements, designs a kind of space-borne integrated signal processing and compression circuit by researching a variety of technologies, such as the high speed and high density analog-digital mixed PCB design, the embedded DSP technology and the image compression technology based on the special-purpose chips. This circuit lays a solid foundation for the research of the high mobility remote sensing camera.

  10. AERIAL SHOWING COMPLETED REMOTE ANALYTICAL FACILITY (CPP627) ADJOINING FUEL PROCESSING ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    AERIAL SHOWING COMPLETED REMOTE ANALYTICAL FACILITY (CPP-627) ADJOINING FUEL PROCESSING BUILDING AND EXCAVATION FOR HOT PILOT PLANT TO RIGHT (CPP-640). INL PHOTO NUMBER NRTS-60-1221. J. Anderson, Photographer, 3/22/1960 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  11. Effects of bias voltage on diamond like carbon coatings deposited using titanium isopropoxide (TIPOT) and acetylene/argon mixtures onto various substrate materials.

    PubMed

    Said, R; Ghumman, C A A; Teodoro, M N D; Ahmed, W; Abuazza, A; Gracio, J

    2010-04-01

    RF-PECVD was used to prepare amorphous of carbon (DLC) onto stainless steel 316 and glass substrates. The substrates were negatively biased at between 100 V to 400 V. Thin films of DLC have been deposited using C2H2 and titanium isopropoxide (TIPOT). Argon was used to generate the plasma in the PECVD system chamber. DEKTAK 8 surface stylus profilometer was used to measure the film thickness and the deposition rate was calculated. Micro Raman spectroscopy was employed to determine the chemical structure and bonding present in the films. Composition analysis of the samples was carried out using VGTOF SIMS (IX23LS) instrument. In addition, X-ray photoelectron spectroscopy (XPS) was used to analyze the composition and chemical state of the films. The wettability of the films was examined using the optical contact angle meter (CAM200) system. Two types of liquids with different polarities were used to study changes in the surface energy. The as-grown films were in the thickness range of 200-400 nm. Raman spectroscopy results showed that the I(D)/I(G) ratio decreased when the bias voltage on the stainless steel substrates was increased. This indicates an increase in the graphitic nature of the film deposited. In contrast, on the glass substrates the I(D)/I(G) ratio increased when the bias voltage was increased indicates a greater degree of diamond like character. Chemical composition determined using XPS showed the presence of carbon and oxygen in both samples on glass and stainless steel substrates. Both coatings the contact angle of the films decreased except for 400 V which showed a slight increase. The oxygen is thought to play an important role on the polar component of a-C.

  12. Unintentional consequences of dual mode plasma reactors: Implications for upscaling lab-record silicon surface passivation by silicon nitride

    NASA Astrophysics Data System (ADS)

    Tong, Jingnan; To, Alexander; Lennon, Alison; Hoex, Bram

    2017-08-01

    Silicon nitride (SiN x ) synthesised by low-temperature plasma enhanced chemical vapour deposition (PECVD) is the most extensively used antireflection coating for crystalline silicon solar cells because of its tunable refractive index in combination with excellent levels of surface and bulk passivation. This has attracted a significant amount of research on developing SiN x films towards an optimal electrical and optical performance. Typically, recipes are first optimised in lab-scale reactors and subsequently, the best settings are transferred to high-throughput reactors. In this paper, we show that for one particular, but widely used, PECVD reactor configuration this upscaling is severely hampered by an important experimental artefact. Specifically, we report on the unintentional deposition of a dual layer structure in a dual mode AK 400 plasma reactor from Roth & Rau which has a significant impact on its surface passivation performance. It is found that the radio frequency (RF) substrate bias ignites an unintentional depositing plasma before the ignition of the main microwave (MW) plasma. This RF plasma deposits a Si-rich intervening SiN x layer (refractive index = 2.4) while using a recipe for stoichiometric SiN x . This layer was found to be 18 nm thick in our case and had an extraordinary impact on the Si surface passivation, witnessed by a reduction in effective surface recombination velocity from 22.5 to 6.2 cm/s. This experimental result may explain some “out of the ordinary” excellent surface passivation results reported recently for nearly stoichiometric SiN x films and has significant consequences when transferring these results to high-throughput deposition systems.

  13. Atmospheric-pressure plasma-enhanced chemical vapor deposition of a-SiCN:H films: Role of precursors on the film growth and properties

    DOE PAGES

    Guruvenket, Srinivasan; Andrie, Steven; Simon, Mark; ...

    2012-09-14

    Atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD) using Surfx Atomflow TM 250D APPJ was utilized to synthesize amorphous silicon carbonitride coatings using tetramethyldisilizane (TMDZ) and hexamethyldisilizane (HMDZ) as the single source precursors. The effect of precursor chemistry and the substrate temperature (T s) on the properties of a-SiCN:H films were evaluated, while nitrogen was used as the reactive gas. Surface morphology of the films was evaluated using atomic force microscopy (AFM); chemical properties were determined using Fourier transform infrared spectroscopy (FTIR); thickness and optical properties were determined using spectroscopic ellipsometry and mechanical properties were determined using nano-indentation. In generalmore » films deposited at substrate temperature (T s) <200 °C contained organic moieties, while the films deposited at T s >200 oC depicted strong Si-N and Si-CN absorption. Refractive indices (n) of the thin films showed values between 1.5 -2.0 depending on the deposition parameters. Mechanical properties of the films determined using nano-indentation revealed that these films have hardness between 0.5 GPa to 15 GPa depending on the Ts. AFM evaluation of the films showed high roughness (R a) values of 2-3 nm for the films grown at low T s (< 250 °C), while the films grown at T s ≥ 300 °C exhibited atomically smooth surface with R a of ~ 0.5 nm. Furthermore, based on the gas phase (plasma) chemistry, precursor chemistry and the other experimental observations, a possible growth model that prevails in the AP-PECVD of a-SiCN:H thin films is proposed.« less

  14. Experimental investigation of defect-assisted and intrinsic water vapor permeation through ultrabarrier films

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Kim, Hyungchul; Singh, Ankit Kumar; Wang, Cheng-Yin

    In the development of ultrabarrier films for packaging electronics, the effective water vapor transmission rate is a combination of permeation through pinhole defects and the intrinsic permeation through the actual barrier film. While it is possible to measure the effective permeation rate through barriers, it is important to develop a better understanding of the contribution from defects to the overall effective barrier performance. Here, we demonstrate a method to investigate independently defect-assisted permeation and intrinsic permeation rates by observing the degradation of a calcium layer encapsulated with a hybrid barrier film, that is, prepared using atomic layer deposition (ALD) andmore » plasma enhanced deposition (PECVD). The results are rationalized using an analytical diffusion model to calculate the permeation rate as a function of spatial position within the barrier. It was observed that a barrier film consisting of a PECVD SiN{sub x} layer combined with an ALD Al{sub 2}O{sub 3}/HfO{sub x} nanolaminate resulted in a defect-assisted water vapor transmission rate (WVTR) of 4.84 × 10{sup −5} g/m{sup 2} day and intrinsic WVTR of 1.41 × 10{sup −4} g/m{sup 2} day at 50 °C/85% RH. Due to the low defect density of the tested barrier film, the defect-assisted WVTR was found to be three times lower than the intrinsic WVTR, and an effective (or total) WVTR value was 1.89 × 10{sup −4} g/m{sup 2} day. Thus, improvements of the barrier performance should focus on reducing the number of defects while also improving the intrinsic barrier performance of the hybrid layer.« less

  15. Atmospheric-pressure plasma-enhanced chemical vapor deposition of a-SiCN:H films: role of precursors on the film growth and properties.

    PubMed

    Guruvenket, Srinivasan; Andrie, Steven; Simon, Mark; Johnson, Kyle W; Sailer, Robert A

    2012-10-24

    Atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD) using Surfx Atomflow(TM) 250D APPJ was utilized to synthesize amorphous silicon carbonitride coatings using tetramethyldisilizane (TMDZ) and hexamethyldisilizane (HMDZ) as the single source precursors. The effect of precursor chemistry and substrate temperature (T(s)) on the properties of a-SiCN:H films were evaluated, while nitrogen was used as the reactive gas. Surface morphology of the films was evaluated using atomic force microscopy (AFM); chemical properties were determined using Fourier transform infrared spectroscopy (FTIR); thickness and optical properties were determined using spectroscopic ellipsometry and mechanical properties were determined using nanoindentation. In general, films deposited at substrate temperature (T(s)) < 200 °C contained organic moieties, while the films deposited at T(s) > 200 °C depicted strong Si-N and Si-CN absorption. Refractive indices (n) of the thin films showed values between 1.5 and 2.0, depending on the deposition parameters. Mechanical properties of the films determined using nanoindentation revealed that these films have hardness between 0.5 GPa and 15 GPa, depending on the T(s) value. AFM evaluation of the films showed high roughness (R(a)) values of 2-3 nm for the films grown at low T(s) (<250 °C) while the films grown at T(s) ≥ 300 °C exhibited atomically smooth surface with R(a) of ~0.5 nm. Based on the gas-phase (plasma) chemistry, precursor chemistry and the other experimental observations, a possible growth model that prevails in the AP-PECVD of a-SiCN:H thin films is proposed.

  16. System design and implementation of digital-image processing using computational grids

    NASA Astrophysics Data System (ADS)

    Shen, Zhanfeng; Luo, Jiancheng; Zhou, Chenghu; Huang, Guangyu; Ma, Weifeng; Ming, Dongping

    2005-06-01

    As a special type of digital image, remotely sensed images are playing increasingly important roles in our daily lives. Because of the enormous amounts of data involved, and the difficulties of data processing and transfer, an important issue for current computer and geo-science experts is developing internet technology to implement rapid remotely sensed image processing. Computational grids are able to solve this problem effectively. These networks of computer workstations enable the sharing of data and resources, and are used by computer experts to solve imbalances of network resources and lopsided usage. In China, computational grids combined with spatial-information-processing technology have formed a new technology: namely, spatial-information grids. In the field of remotely sensed images, spatial-information grids work more effectively for network computing, data processing, resource sharing, task cooperation and so on. This paper focuses mainly on the application of computational grids to digital-image processing. Firstly, we describe the architecture of digital-image processing on the basis of computational grids, its implementation is then discussed in detail with respect to the technology of middleware. The whole network-based intelligent image-processing system is evaluated on the basis of the experimental analysis of remotely sensed image-processing tasks; the results confirm the feasibility of the application of computational grids to digital-image processing.

  17. Application research on land use remote sensing dynamic monitoring: A case study of Anning district, Lanzhou

    NASA Astrophysics Data System (ADS)

    Zhu, Yunqiang; Zhu, Huazhong; Lu, Heli; Ni, Jianguang; Zhu, Shaoxia

    2005-10-01

    Remote sensing dynamic monitoring of land use can detect the change information of land use and update the current land use map, which is important for rational utilization and scientific management of land resources. This paper discusses the technological procedure of remote sensing dynamic monitoring of land use including the process of remote sensing images, the extraction of annual change information of land use, field survey, indoor post processing and accuracy assessment. Especially, we emphasize on comparative research on the choice of remote sensing rectifying models, image fusion algorithms and accuracy assessment methods. Taking Anning district in Lanzhou as an example, we extract the land use change information of the district during 2002-2003, access monitoring accuracy and analyze the reason of land use change.

  18. An Interactive Web-Based Analysis Framework for Remote Sensing Cloud Computing

    NASA Astrophysics Data System (ADS)

    Wang, X. Z.; Zhang, H. M.; Zhao, J. H.; Lin, Q. H.; Zhou, Y. C.; Li, J. H.

    2015-07-01

    Spatiotemporal data, especially remote sensing data, are widely used in ecological, geographical, agriculture, and military research and applications. With the development of remote sensing technology, more and more remote sensing data are accumulated and stored in the cloud. An effective way for cloud users to access and analyse these massive spatiotemporal data in the web clients becomes an urgent issue. In this paper, we proposed a new scalable, interactive and web-based cloud computing solution for massive remote sensing data analysis. We build a spatiotemporal analysis platform to provide the end-user with a safe and convenient way to access massive remote sensing data stored in the cloud. The lightweight cloud storage system used to store public data and users' private data is constructed based on open source distributed file system. In it, massive remote sensing data are stored as public data, while the intermediate and input data are stored as private data. The elastic, scalable, and flexible cloud computing environment is built using Docker, which is a technology of open-source lightweight cloud computing container in the Linux operating system. In the Docker container, open-source software such as IPython, NumPy, GDAL, and Grass GIS etc., are deployed. Users can write scripts in the IPython Notebook web page through the web browser to process data, and the scripts will be submitted to IPython kernel to be executed. By comparing the performance of remote sensing data analysis tasks executed in Docker container, KVM virtual machines and physical machines respectively, we can conclude that the cloud computing environment built by Docker makes the greatest use of the host system resources, and can handle more concurrent spatial-temporal computing tasks. Docker technology provides resource isolation mechanism in aspects of IO, CPU, and memory etc., which offers security guarantee when processing remote sensing data in the IPython Notebook. Users can write complex data processing code on the web directly, so they can design their own data processing algorithm.

  19. Remote Sensing: A valuable tool in the Forest Service decision making process. [in Utah

    NASA Technical Reports Server (NTRS)

    Stanton, F. L.

    1975-01-01

    Forest Service studies for integrating remotely sensed data into existing information systems highlight a need to: (1) re-examine present methods of collecting and organizing data, (2) develop an integrated information system for rapidly processing and interpreting data, (3) apply existing technological tools in new ways, and (4) provide accurate and timely information for making right management decisions. The Forest Service developed an integrated information system using remote sensors, microdensitometers, computer hardware and software, and interactive accessories. Their efforts substantially reduce the time it takes for collecting and processing data.

  20. Real-Time and Post-Processed Georeferencing for Hyperpspectral Drone Remote Sensing

    NASA Astrophysics Data System (ADS)

    Oliveira, R. A.; Khoramshahi, E.; Suomalainen, J.; Hakala, T.; Viljanen, N.; Honkavaara, E.

    2018-05-01

    The use of drones and photogrammetric technologies are increasing rapidly in different applications. Currently, drone processing workflow is in most cases based on sequential image acquisition and post-processing, but there are great interests towards real-time solutions. Fast and reliable real-time drone data processing can benefit, for instance, environmental monitoring tasks in precision agriculture and in forest. Recent developments in miniaturized and low-cost inertial measurement systems and GNSS sensors, and Real-time kinematic (RTK) position data are offering new perspectives for the comprehensive remote sensing applications. The combination of these sensors and light-weight and low-cost multi- or hyperspectral frame sensors in drones provides the opportunity of creating near real-time or real-time remote sensing data of target object. We have developed a system with direct georeferencing onboard drone to be used combined with hyperspectral frame cameras in real-time remote sensing applications. The objective of this study is to evaluate the real-time georeferencing comparing with post-processing solutions. Experimental data sets were captured in agricultural and forested test sites using the system. The accuracy of onboard georeferencing data were better than 0.5 m. The results showed that the real-time remote sensing is promising and feasible in both test sites.

  1. Thirty years of use and improvement of remote sensing, applied to epidemiology: from early promises to lasting frustration.

    PubMed

    Herbreteau, Vincent; Salem, Gérard; Souris, Marc; Hugot, Jean-Pierre; Gonzalez, Jean-Paul

    2007-06-01

    Remote sensing, referring to the remote study of objects, was originally developed for Earth observation, through the use of sensors on board planes or satellites. Improvements in the use and accessibility of multi-temporal satellite-derived environmental data have, for 30 years, contributed to a growing use in epidemiology. Despite the potential of remote-sensed images and processing techniques for a better knowledge of disease dynamics, an exhaustive analysis of the bibliography shows a generalized use of pre-processed spatial data and low-cost images, resulting in a limited adaptability when addressing biological questions.

  2. Comparison between mixed and spatially separated remote phosphor fabricated via a screen-printing process

    NASA Astrophysics Data System (ADS)

    Kim, Byung-Ho; Hwang, Jonghee; Lee, Young Jin; Kim, Jin-Ho; Jeon, Dae-Woo; Lee, Mi Jai

    2016-08-01

    We developed a fabrication method for remote phosphor by a screen-printing process, using green phosphor, red phosphor, and thermally stable glass frit. The glass frit was introduced for long-term stability. The optical properties of the remote phosphor were observed via an integrating sphere; the photoluminescence spectrum dramatically changed on incorporating a minor amount of the red phosphor. These unique optical properties were elucidated using four factors: phosphor ratio, scattering induced by packing density, light intensity per unit volume, and reabsorption. The thermal stability of the remote phosphor was investigated at 500°C, demonstrating its outstanding thermal properties.

  3. Generic System for Remote Testing and Calibration of Measuring Instruments: Security Architecture

    NASA Astrophysics Data System (ADS)

    Jurčević, M.; Hegeduš, H.; Golub, M.

    2010-01-01

    Testing and calibration of laboratory instruments and reference standards is a routine activity and is a resource and time consuming process. Since many of the modern instruments include some communication interfaces, it is possible to create a remote calibration system. This approach addresses a wide range of possible applications and permits to drive a number of different devices. On the other hand, remote calibration process involves a number of security issues due to recommendations specified in standard ISO/IEC 17025, since it is not under total control of the calibration laboratory personnel who will sign the calibration certificate. This approach implies that the traceability and integrity of the calibration process directly depends on the collected measurement data. The reliable and secure remote control and monitoring of instruments is a crucial aspect of internet-enabled calibration procedure.

  4. Ionospheric Profiles from Ultraviolet Remote Sensing

    DTIC Science & Technology

    1997-09-30

    The long-term goal of this project is to obtain ionospheric profiles from ultraviolet remote sensing of the ionosphere from orbiting space platforms... Remote sensing of the nighttime ionosphere is a more straightforward process because of the absence of the complications brought about by daytime

  5. In-depth investigation of spin-on doped solar cells with thermally grown oxide passivation

    NASA Astrophysics Data System (ADS)

    Ahmad, Samir Mahmmod; Cheow, Siu Leong; Ludin, Norasikin A.; Sopian, K.; Zaidi, Saleem H.

    Solar cell industrial manufacturing, based largely on proven semiconductor processing technologies supported by significant advancements in automation, has reached a plateau in terms of cost and efficiency. However, solar cell manufacturing cost (dollar/watt) is still substantially higher than fossil fuels. The route to lowering cost may not lie with continuing automation and economies of scale. Alternate fabrication processes with lower cost and environmental-sustainability coupled with self-reliance, simplicity, and affordability may lead to price compatibility with carbon-based fuels. In this paper, a custom-designed formulation of phosphoric acid has been investigated, for n-type doping in p-type substrates, as a function of concentration and drive-in temperature. For post-diffusion surface passivation and anti-reflection, thermally-grown oxide films in 50-150-nm thickness were grown. These fabrication methods facilitate process simplicity, reduced costs, and environmental sustainability by elimination of poisonous chemicals and toxic gases (POCl3, SiH4, NH3). Simultaneous fire-through contact formation process based on screen-printed front surface Ag and back surface through thermally grown oxide films was optimized as a function of the peak temperature in conveyor belt furnace. Highest efficiency solar cells fabricated exhibited efficiency of ∼13%. Analysis of results based on internal quantum efficiency and minority carried measurements reveals three contributing factors: high front surface recombination, low minority carrier lifetime, and higher reflection. Solar cell simulations based on PC1D showed that, with improved passivation, lower reflection, and high lifetimes, efficiency can be enhanced to match with commercially-produced PECVD SiN-coated solar cells.

  6. Thermal Infrared Remote Sensing for Analysis of Landscape Ecological Processes: Methods and Applications

    NASA Technical Reports Server (NTRS)

    Quattrochi, Dale A.; Luvall, Jeffrey C.

    1998-01-01

    Thermal Infrared (TIR) remote sensing data can provide important measurements of surface energy fluxes and temperatures, which are integral to understanding landscape processes and responses. One example of this is the successful application of TIR remote sensing data to estimate evapotranspiration and soil moisture, where results from a number of studies suggest that satellite-based measurements from TIR remote sensing data can lead to more accurate regional-scale estimates of daily evapotranspiration. With further refinement in analytical techniques and models, the use of TIR data from airborne and satellite sensors could be very useful for parameterizing surface moisture conditions and developing better simulations of landscape energy exchange over a variety of conditions and space and time scales. Thus, TIR remote sensing data can significantly contribute to the observation, measurement, and analysis of energy balance characteristics (i.e., the fluxes and redistribution of thermal energy within and across the land surface) as an implicit and important aspect of landscape dynamics and landscape functioning. The application of TIR remote sensing data in landscape ecological studies has been limited, however, for several fundamental reasons that relate primarily to the perceived difficulty in use and availability of these data by the landscape ecology community, and from the fragmentation of references on TIR remote sensing throughout the scientific literature. It is our purpose here to provide evidence from work that has employed TIR remote sensing for analysis of landscape characteristics to illustrate how these data can provide important data for the improved measurement of landscape energy response and energy flux relationships. We examine the direct or indirect use of TIR remote sensing data to analyze landscape biophysical characteristics, thereby offering some insight on how these data can be used more robustly to further the understanding and modeling of landscape ecological processes.

  7. Using Skype to support remote clinical supervision for health professionals delivering a sustained maternal early childhood programme: a phenomenographical study.

    PubMed

    Bruce, Tracey; Byrne, Fiona; Kemp, Lynn

    2018-02-01

    Skype technology was implemented by the Australian Maternal Early Childhood Sustained Home-visiting (MECSH) Support Service as a tool for the remote provision of clinical supervision for clinicians working in the MECSH program in Seoul, South Korea. To gain a better understanding of the processes underpinning sustainable delivery of remote clinical supervision using digital technologies. A phenomenographical study. Recorded notes and reflections on each supervision session, noting exemplars and characteristics of the experience were read and re-read to derive the characterizations of the experience. The experience has provided learnings in three domains: (1) the processes in using Skype; (2) supervisory processes; and (3) language translation, including managing clarity of, and time for translation. Skype has potential for use in remote provision of clinical supervision, including where translation is required. Further research evaluating the benefit of telesupervision from supervisor and supervisee perspectives is necessary to determine if it is a sustainable process.

  8. Design and Verification of Remote Sensing Image Data Center Storage Architecture Based on Hadoop

    NASA Astrophysics Data System (ADS)

    Tang, D.; Zhou, X.; Jing, Y.; Cong, W.; Li, C.

    2018-04-01

    The data center is a new concept of data processing and application proposed in recent years. It is a new method of processing technologies based on data, parallel computing, and compatibility with different hardware clusters. While optimizing the data storage management structure, it fully utilizes cluster resource computing nodes and improves the efficiency of data parallel application. This paper used mature Hadoop technology to build a large-scale distributed image management architecture for remote sensing imagery. Using MapReduce parallel processing technology, it called many computing nodes to process image storage blocks and pyramids in the background to improve the efficiency of image reading and application and sovled the need for concurrent multi-user high-speed access to remotely sensed data. It verified the rationality, reliability and superiority of the system design by testing the storage efficiency of different image data and multi-users and analyzing the distributed storage architecture to improve the application efficiency of remote sensing images through building an actual Hadoop service system.

  9. The value of remote sensing techniques in supporting effective extrapolation across multiple marine spatial scales.

    PubMed

    Strong, James Asa; Elliott, Michael

    2017-03-15

    The reporting of ecological phenomena and environmental status routinely required point observations, collected with traditional sampling approaches to be extrapolated to larger reporting scales. This process encompasses difficulties that can quickly entrain significant errors. Remote sensing techniques offer insights and exceptional spatial coverage for observing the marine environment. This review provides guidance on (i) the structures and discontinuities inherent within the extrapolative process, (ii) how to extrapolate effectively across multiple spatial scales, and (iii) remote sensing techniques and data sets that can facilitate this process. This evaluation illustrates that remote sensing techniques are a critical component in extrapolation and likely to underpin the production of high-quality assessments of ecological phenomena and the regional reporting of environmental status. Ultimately, is it hoped that this guidance will aid the production of robust and consistent extrapolations that also make full use of the techniques and data sets that expedite this process. Copyright © 2017 Elsevier Ltd. All rights reserved.

  10. Nanomaterials for Electronics and Optoelectronics

    NASA Technical Reports Server (NTRS)

    Koehne, Jessica E.; Meyyappan, M.

    2011-01-01

    Nanomaterials such as carbon nanotubes(CNTs), graphene, and inorganic nanowires(INWs) have shown interesting electronic, mechanical, optical, thermal, and other properties and therefore have been pursued for a variety of applications by the nanotechnology community ranging from electronics to nanocomposites. While the first two are carbon-based materials, the INWs in the literature include silicon, germanium, III-V, II-VI, a variety of oxides, nitrides, antimonides and others. In this talk, first an overview of growth of these three classes of materials by CVD and PECVD will be presented along with results from characterization. Then applications in development of chemical sensors, biosensors, energy storage devices and novel memory architectures will be discussed.

  11. AC-coupled GaAs microstrip detectors with a new type of integrated bias resistors

    NASA Astrophysics Data System (ADS)

    Irsigler, R.; Geppert, R.; Göppert, R.; Hornung, M.; Ludwig, J.; Rogalla, M.; Runge, K.; Schmid, Th.; Söldner-Rembold, A.; Webel, M.; Weber, C.

    1998-02-01

    Full-size single-sided GaAs microstrip detectors with integrated coupling capacitors and bias resistors have been fabricated on 3″ substrate wafers. PECVD deposited SiO 2 and {SiO 2}/{Si 3N 4} layers were used to provide coupling capacitances of 32.5 and 61.6 pF/cm, respectively. The resistors are made of sputtered CERMET using simple lift of technique. The sheet resistivity of 78 kΩ/□ and the thermal coefficient of resistance of less than 4 × 10 -3/°C satisfy the demands of small area biasing resistors, working on a wide temperature range.

  12. Bond topography and nanostructure of hydrogenated fullerene-like carbon films: A comparative study

    NASA Astrophysics Data System (ADS)

    Wang, Yongfu; Gao, Kaixiong; Shi, Jing; Zhang, Junyan

    2016-09-01

    Fullerene-like nanostructural hydrogenated amorphous carbon (FL-C:H) films were prepared by dc- and pulse- plasma enhanced chemical vapor deposition technique (PECVD). Both the films exhibit relatively stresses (0.63 GPa) in spite of their FL features and nanostructural bonding configurations, especially the pentagonal carbon rings. The creation of pentagonal rings is not fully driven by thermodynamics, but is closely related to compressive stress determined by the ion bombardment at the discharged state of the pulse- and dc- discharged plasmas methods. The dc method leads to FL's basal planes which contain less cross-linkages, and causes amorphous strongly hydrogenated structures.

  13. Theory on data processing and instrumentation. [remote sensing

    NASA Technical Reports Server (NTRS)

    Billingsley, F. C.

    1978-01-01

    A selection of NASA Earth observations programs are reviewed, emphasizing hardware capabilities. Sampling theory, noise and detection considerations, and image evaluation are discussed for remote sensor imagery. Vision and perception are considered, leading to numerical image processing. The use of multispectral scanners and of multispectral data processing systems, including digital image processing, is depicted. Multispectral sensing and analysis in application with land use and geographical data systems are also covered.

  14. Remote Sensing as a Demonstration of Applied Physics.

    ERIC Educational Resources Information Center

    Colwell, Robert N.

    1980-01-01

    Provides information about the field of remote sensing, including discussions of geo-synchronous and sun-synchronous remote-sensing platforms, the actual physical processes and equipment involved in sensing, the analysis of images by humans and machines, and inexpensive, small scale methods, including aerial photography. (CS)

  15. Running VisIt Software on the Peregrine System | High-Performance Computing

    Science.gov Websites

    kilobyte range. VisIt features a robust remote visualization capability. VisIt can be started on a local machine and used to visualize data on a remote compute cluster.The remote machine must be able to send VisIt module must be loaded as part of this process. To enable remote visualization the 'module load

  16. CORSE-81: The 1981 Conference on Remote Sensing Education

    NASA Technical Reports Server (NTRS)

    Davis, S. M. (Compiler)

    1981-01-01

    Summaries of the presentations and tutorial workshops addressing various strategies in remote sensing education are presented. Course design from different discipline perspectives, equipment requirements for image interpretation and processing, and the role of universities, private industry, and government agencies in the education process are covered.

  17. Culture, context and therapeutic processes: delivering a parent-child intervention in a remote Aboriginal community.

    PubMed

    Mares, Sarah; Robinson, Gary

    2012-04-01

    Little is written about the process of delivering mainstream, evidence-based therapeutic interventions for Aboriginal children and families in remote communities. Patterns of interaction between parents and children and expectations about parenting and professional roles and responsibilities vary across cultural contexts. This can be a challenging experience for professionals accustomed to work in urban settings. Language is only a part of cultural difference, and the outsider in a therapeutic group in an Aboriginal community is outside not only in language but also in access to community relationships and a place within those relationships. This paper uses examples from Let's Start, a therapeutic parent-child intervention to describe the impact of distance, culture and relationships in a remote Aboriginal community, on the therapeutic framework, group processes and relationships. Cultural and contextual factors influence communication, relationships and group processes in a therapeutic group program for children and parents in a remote Aboriginal community. Group leaders from within and from outside the community, are likely to have complementary skills. Cultural and contextual factors influence communication, relationships and group processes in a therapeutic group program for children and parents in a remote Aboriginal community. Group leaders from within and from outside the community, are likely to have complementary skills. Program adaptation, evaluation and staff training and support need to take these factors into account to ensure cultural accessibility without loss of therapeutic fidelity and efficacy.

  18. Geomorphic Processes and Remote Sensing Signatures of Alluvial Fans in the Kun Lun Mountains, China

    NASA Technical Reports Server (NTRS)

    Farr, Tom G.; Chadwick, Oliver A.

    1996-01-01

    The timing of alluvial deposition in arid and semiarid areas is tied to land-surface instability caused by regional climate changes. The distribution pattern of dated deposits provides maps of regional land-surface response to past climate change. Sensitivity to differences in surface roughness and composition makes remote sensing techniques useful for regional mapping of alluvial deposits. Radar images from the Spaceborne Radar Laboratory and visible wavelength images from the French SPOT satellite were used to determine remote sensing signatures of alluvial fan units for an area in the Kun Lun Mountains of northwestern China. These data were combined with field observations to compare surface processes and their effects on remote sensing signatures in northwestern China and the southwestern United States. Geomorphic processes affecting alluvial fans in the two areas include aeolian deposition, desert varnish, and fluvial dissection. However, salt weathering is a much more important process in the Kun Lun than in the southwestern United States. This slows the formation of desert varnish and prevents desert pavement from forming. Thus the Kun Lun signatures are characteristic of the dominance of salt weathering, while signatures from the southwestern United States are characteristic of the dominance of desert varnish and pavement processes. Remote sensing signatures are consistent enough in these two regions to be used for mapping fan units over large areas.

  19. Accommodating Student Diversity in Remote Sensing Instruction.

    ERIC Educational Resources Information Center

    Hammen, John L., III.

    1992-01-01

    Discusses the difficulty of teaching computer-based remote sensing to students of varying levels of computer literacy. Suggests an instructional method that accommodates all levels of technical expertise through the use of microcomputers. Presents a curriculum that includes an introduction to remote sensing, digital image processing, and…

  20. Machine processing of remotely sensed data; Proceedings of the Fifth Annual Symposium, Purdue University, West Lafayette, Ind., June 27-29, 1979

    NASA Technical Reports Server (NTRS)

    Tendam, I. M. (Editor); Morrison, D. B.

    1979-01-01

    Papers are presented on techniques and applications for the machine processing of remotely sensed data. Specific topics include the Landsat-D mission and thematic mapper, data preprocessing to account for atmospheric and solar illumination effects, sampling in crop area estimation, the LACIE program, the assessment of revegetation on surface mine land using color infrared aerial photography, the identification of surface-disturbed features through a nonparametric analysis of Landsat MSS data, the extraction of soil data in vegetated areas, and the transfer of remote sensing computer technology to developing nations. Attention is also given to the classification of multispectral remote sensing data using context, the use of guided clustering techniques for Landsat data analysis in forest land cover mapping, crop classification using an interactive color display, and future trends in image processing software and hardware.

  1. Thermal ink-jet device using single-chip silicon microchannels

    NASA Astrophysics Data System (ADS)

    Wuu, DongSing; Cheng, Chen-Yue; Horng, RayHua; Chan, G. C.; Chiu, Sao-Ling; Wu, Yi-Yung

    1998-06-01

    We present a new method to fabricate silicon microfluidic channels by through-hole etching with subsequent planarization. The method is based on etching out the deep grooves through a perforated silicon carbide membrane, followed by sealing the membrane with plasma-enhanced chemical vapor deposition (PECVD). Low-pressure-chemical-vapor- deposited (LPCVD) polysilicon was used as a sacrificial layer to define the channel structure and only one etching step is required. This permits the realization of planarization after a very deep etching step in silicon and offers the possibility for film deposition, resist spinning and film patterning across deep grooves. The process technology was demonstrated on the fabrication of a monolithic silicon microchannel structure for thermal inkjet printing. The Ta-Al heater arrays are integrated on the top of each microchannel, which connect to a common on-chip front-end ink reservoir. The fabrication of this device requires six masks and no active nozzle-to-chip alignment. Moreover, the present micromachining process is compatible with the addition of on-chip circuitry for multiplexing the heater control signals. Heat transfer efficiency to the ink is enhanced by the high thermal conductivity of the silicon carbide in the channel ceiling, while the bulk silicon maintains high interchannel isolation. The fabricated inkjet devices show the droplet sizes of 20 - 50 micrometer in diameter with various channel dimensions and stable ejection of ink droplets more than 1 million.

  2. A vertically aligned carbon nanotube-based impedance sensing biosensor for rapid and high sensitive detection of cancer cells.

    PubMed

    Abdolahad, Mohammad; Taghinejad, Mohammad; Taghinejad, Hossein; Janmaleki, Mohsen; Mohajerzadeh, Shams

    2012-03-21

    A novel vertically aligned carbon nanotube based electrical cell impedance sensing biosensor (CNT-ECIS) was demonstrated for the first time as a more rapid, sensitive and specific device for the detection of cancer cells. This biosensor is based on the fast entrapment of cancer cells on vertically aligned carbon nanotube arrays and leads to mechanical and electrical interactions between CNT tips and entrapped cell membranes, changing the impedance of the biosensor. CNT-ECIS was fabricated through a photolithography process on Ni/SiO(2)/Si layers. Carbon nanotube arrays have been grown on 9 nm thick patterned Ni microelectrodes by DC-PECVD. SW48 colon cancer cells were passed over the surface of CNT covered electrodes to be specifically entrapped on elastic nanotube beams. CNT arrays act as both adhesive and conductive agents and impedance changes occurred as fast as 30 s (for whole entrapment and signaling processes). CNT-ECIS detected the cancer cells with the concentration as low as 4000 cells cm(-2) on its surface and a sensitivity of 1.7 × 10(-3)Ω cm(2). Time and cell efficiency factor (TEF and CEF) parameters were defined which describe the sensor's rapidness and resolution, respectively. TEF and CEF of CNT-ECIS were much higher than other cell based electrical biosensors which are compared in this paper.

  3. A study of selenium nanoparticles as charge storage element for flexible semi-transparent memory devices

    NASA Astrophysics Data System (ADS)

    Alotaibi, Sattam; Nama Manjunatha, Krishna; Paul, Shashi

    2017-12-01

    Flexible Semi-Transparent electronic memory would be useful in coming years for integrated flexible transparent electronic devices. However, attaining such flexibility and semi-transparency leads to the boundaries in material composition. Thus, impeding processing speed and device performance. In this work, we present the use of inorganic stable selenium nanoparticles (Se-NPs) as a storage element and hydrogenated amorphous carbon (a-C:H) as an insulating layer in two terminal non-volatile physically flexible and semi-transparent capacitive memory devices (2T-NMDs). Furthermore, a-C:H films can be deposited at very low temperature (<40° C) on a variety of substrates (including many kinds of plastic substrates) by an industrial technique called Plasma Enhanced Chemical Vapour Deposition (PECVD) which is available in many existing fabrication labs. Self-assembled Se-NPs has several unique features including deposition at room temperature by simple vacuum thermal evaporation process without the need for further optimisation. This facilitates the fabrication of memory on a flexible substrate. Moreover, the memory behaviour of the Se-NPs was found to be more distinct than those of the semiconductor and metal nanostructures due to higher work function compared to the commonly used semiconductor and metal species. The memory behaviour was observed from the hysteresis of current-voltage (I-V) measurements while the two distinguishable electrical conductivity states (;0; and "1") were studied by current-time (I-t) measurements.

  4. Plasma Diagnostics For The Investigation of Silane Based Glow Discharge Deposition Processes

    NASA Astrophysics Data System (ADS)

    Mataras, Dimitrios

    2001-10-01

    In this work is presented the study of microcrystalline silicon PECVD process through highly diluted silane in hydrogen discharges. The investigation is performed by applying different non intrusive plasma diagnostics (electrical, optical, mass spectrometric and laser interferometric measurements). Each of these measurements is related to different plasma sub-processes (gas physics, plasma chemistry and plasma surface interaction) and compose a complete set, proper for the investigation of the effect of external discharge parameters on the deposition processes. In the specific case these plasma diagnostics are applied for prospecting the optimal experimental conditions from the ic-Si:H deposition rate point of view. Namely, the main characteristics of the effect of frequency, discharge geometry, power consumption and total gas pressure on the deposition process are presented successively. Special attention is given to the study of the frequency effect (13.56 MHz 50 MHz) indicating that the correct way to compare results of different driving frequency discharges is by maintaining constant the total power dissipation in the discharge. The important role of frequency in the achievement of high deposition rates and on the optimization of all other parameters is underlined. Finally, the proper combination of experimental conditions that result from the optimal choice of each of the above-mentioned discharge parameters and lead to high microcrystalline silicon deposition rates (7.5 Å/sec) is presented. The increase of silane dissociation rate towards neutral radicals (frequency effect), the contribution of highly sticking to the surface radicals (discharge geometry optimum) and the controlled production of higher radicals through secondary gas phase reactions (total gas pressure), are presented as prerequisites for the achievement of high deposition rates.

  5. Old-new ERP effects and remote memories: the late parietal effect is absent as recollection fails whereas the early mid-frontal effect persists as familiarity is retained

    PubMed Central

    Tsivilis, Dimitris; Allan, Kevin; Roberts, Jenna; Williams, Nicola; Downes, John Joseph; El-Deredy, Wael

    2015-01-01

    Understanding the electrophysiological correlates of recognition memory processes has been a focus of research in recent years. This study investigated the effects of retention interval on recognition memory by comparing memory for objects encoded four weeks (remote) or 5 min (recent) before testing. In Experiment 1, event related potentials (ERPs) were acquired while participants performed a yes-no recognition memory task involving remote, recent and novel objects. Relative to correctly rejected new items, remote and recent hits showed an attenuated frontal negativity from 300–500 ms post-stimulus. This effect, also known as the FN400, has been previously associated with familiarity memory. Recent and remote recognition ERPs did not differ from each other at this time-window. By contrast, recent but not remote recognition showed increased parietal positivity from around 500 ms post-stimulus. This late parietal effect (LPE), which is considered a correlate of recollection-related processes, also discriminated between recent and remote memories. A second, behavioral experiment confirmed that remote memories unlike recent memories were based almost exclusively on familiarity. These findings support the idea that the FN400 and LPE are indices of familiarity and recollection memory, respectively and show that remote and recent memories are functionally and anatomically distinct. PMID:26528163

  6. Software Suite to Support In-Flight Characterization of Remote Sensing Systems

    NASA Technical Reports Server (NTRS)

    Stanley, Thomas; Holekamp, Kara; Gasser, Gerald; Tabor, Wes; Vaughan, Ronald; Ryan, Robert; Pagnutti, Mary; Blonski, Slawomir; Kenton, Ross

    2014-01-01

    A characterization software suite was developed to facilitate NASA's in-flight characterization of commercial remote sensing systems. Characterization of aerial and satellite systems requires knowledge of ground characteristics, or ground truth. This information is typically obtained with instruments taking measurements prior to or during a remote sensing system overpass. Acquired ground-truth data, which can consist of hundreds of measurements with different data formats, must be processed before it can be used in the characterization. Accurate in-flight characterization of remote sensing systems relies on multiple field data acquisitions that are efficiently processed, with minimal error. To address the need for timely, reproducible ground-truth data, a characterization software suite was developed to automate the data processing methods. The characterization software suite is engineering code, requiring some prior knowledge and expertise to run. The suite consists of component scripts for each of the three main in-flight characterization types: radiometric, geometric, and spatial. The component scripts for the radiometric characterization operate primarily by reading the raw data acquired by the field instruments, combining it with other applicable information, and then reducing it to a format that is appropriate for input into MODTRAN (MODerate resolution atmospheric TRANsmission), an Air Force Research Laboratory-developed radiative transport code used to predict at-sensor measurements. The geometric scripts operate by comparing identified target locations from the remote sensing image to known target locations, producing circular error statistics defined by the Federal Geographic Data Committee Standards. The spatial scripts analyze a target edge within the image, and produce estimates of Relative Edge Response and the value of the Modulation Transfer Function at the Nyquist frequency. The software suite enables rapid, efficient, automated processing of ground truth data, which has been used to provide reproducible characterizations on a number of commercial remote sensing systems. Overall, this characterization software suite improves the reliability of ground-truth data processing techniques that are required for remote sensing system in-flight characterizations.

  7. Experimental Sea Slicks in the Marsen (Maritime Remote Sensing) Exercise.

    DTIC Science & Technology

    1980-10-30

    Experimental slicks with various surface properties were generated in the North Sea as part of the MARSEN (Maritime Remote Sensing ) exercise. The one...with remote sensing instrumentation. Because of the numerous effects of surface films on air-sea interfacial processes, these experiments were designed...information was obtained on the influence of sea surface films on the interpretation of signals received by remote sensing systems. Criteria for the

  8. A study of the potential of remote sensors in urban transportation planning

    NASA Technical Reports Server (NTRS)

    Rietschier, D.; Modlin, D. G., Jr.

    1973-01-01

    The potential uses of remotely sensed data as applied to the transportation planning process are presented. By utilizing the remote sensing technology developed by the National Aeronautics and Space Administration in the various space programs, it is hoped that both the expense and errors inherent in the conventional data collection techniques can be avoided. Additional bonuses derived from the use of remotely sensed data are those of the permanent record nature of the data and the traffic engineering data simultaneously made available. The major mathematical modeling phases and the role remotely sensed data might play in replacing conventionally collected data are discussed. Typical surveys undertaken in the overall planning process determine the nature and extent of travel desires, land uses, transportation facilities and socio-economic characteristics. Except for the socio-economic data, data collected in the other surveys mentioned can be taken from photographs in sufficient detail to be useful in the modeling procedures.

  9. Use of remote sensing technology for inventorying and planning utilization of land resources in South Dakota

    NASA Technical Reports Server (NTRS)

    1974-01-01

    A comprehensive land use planning process model is being developed in Meade County, South Dakota, using remote sensing technology. The proper role of remote sensing in the land use planning process is being determined by interaction of remote sensing specialists with local land use planners. The data that were collected by remote sensing techniques are as follows: (1) level I land use data interpreted at a scale of 1:250,000 from false color enlargement prints of ERTS-1 color composite transparencies; (2) detailed land use data interpreted at a scale of 1:24,000 from enlargement color prints of high altitude RB-57 photography; and (3) general soils map interpreted at a scale of 1:250,000 from false color enlargement prints of ERTS-1 color composite transparencies. In addition to use of imagery as an interpretation aid, the utility of using photographs as base maps was demonstrated.

  10. Multispectral remote sensing from unmanned aircraft: image processing workflows and applications for rangeland environments

    USDA-ARS?s Scientific Manuscript database

    Using unmanned aircraft systems (UAS) as remote sensing platforms offers the unique ability for repeated deployment for acquisition of high temporal resolution data at very high spatial resolution. Most image acquisitions from UAS have been in the visible bands, while multispectral remote sensing ap...

  11. Remote Teaching Experiments on Magnetic Domains in Thin Films

    ERIC Educational Resources Information Center

    Dobrogowski, W.; Maziewski, A.; Zablotskii, V.

    2007-01-01

    We describe our experience in building a remote laboratory for teaching magnetic domains. Fulfilling the proposed on-line experiments, students can observe and study magnetization processes that are often difficult to explain with written material. It is proposed that networks of remotely accessible laboratories could be integrated in the Global…

  12. Conference of Remote Sensing Educators (CORSE-78)

    NASA Technical Reports Server (NTRS)

    1978-01-01

    Ways of improving the teaching of remote sensing students at colleges and universities are discussed. Formal papers and workshops on various Earth resources disciplines, image interpretation, and data processing concepts are presented. An inventory of existing remote sensing and related subject courses being given in western regional universities is included.

  13. Textbooks and technical references for remote sensing

    NASA Technical Reports Server (NTRS)

    Rudd, R. D.; Bowden, L. W.; Colwell, R. N.; Estes, J. E.

    1980-01-01

    A selective bibliography is presented which cites 89 textbooks, monographs, and articles covering introductory and advanced remote sensing techniques, photointerpretation, photogrammetry, and image processing.

  14. Development of amorphous SiC for MEMS-based microbridges

    NASA Astrophysics Data System (ADS)

    Summers, James B.; Scardelletti, Maximilian; Parro, Rocco; Zorman, Christian A.

    2007-02-01

    This paper reports our effort to develop amorphous hydrogenated silicon carbide (a-SiC:H) films specifically designed for MEMS-based microbridges using methane and silane as the precursor gases. In our work, the a-SiC:H films were deposited in a simple, commercial PECVD system at a fixed temperature of 300°C. Films with thicknesses from 100 nm to 1000 nm, a typical range for many MEMS applications, were deposited. Deposition parameters such as deposition pressure and methane-to-silane ratio were varied in order to obtain films with suitable residual stresses. Average residual stress in the as-deposited films selected for device fabrication was found by wafer curvature measurements to be -658 +/- 22 MPa, which could be converted to 177 +/- 40 MPa after thermal annealing at 450°C, making them suitable for micromachined bridges, membranes and other anchored structures. Bulk micromachined membranes were constructed to determine the Young's modulus of the annealed films, which was found to be 205 +/- 6 GPa. Chemical inertness was tested in aggressive solutions such as KOH and HF. Prototype microbridge actuators were fabricated using a simple surface micromachining process to assess the potential of the a-SiC:H films as structural layers for MEMS applications.

  15. Understanding the Mechanism of SiC Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Developing Routes toward SiC Atomic Layer Deposition (ALD) with Density Functional Theory.

    PubMed

    Filatova, Ekaterina A; Hausmann, Dennis; Elliott, Simon D

    2018-05-02

    Understanding the mechanism of SiC chemical vapor deposition (CVD) is an important step in investigating the routes toward future atomic layer deposition (ALD) of SiC. The energetics of various silicon and carbon precursors reacting with bare and H-terminated 3C-SiC (011) are analyzed using ab initio density functional theory (DFT). Bare SiC is found to be reactive to silicon and carbon precursors, while H-terminated SiC is found to be not reactive with these precursors at 0 K. Furthermore, the reaction pathways of silane plasma fragments SiH 3 and SiH 2 are calculated along with the energetics for the methane plasma fragments CH 3 and CH 2 . SiH 3 and SiH 2 fragments follow different mechanisms toward Si growth, of which the SiH 3 mechanism is found to be more thermodynamically favorable. Moreover, both of the fragments were found to show selectivity toward the Si-H bond and not C-H bond of the surface. On the basis of this, a selective Si deposition process is suggested for silicon versus carbon-doped silicon oxide surfaces.

  16. Calculation of optical band gaps of a-Si:H thin films by ellipsometry and UV-Vis spectrophotometry

    NASA Astrophysics Data System (ADS)

    Qiu, Yijiao; Li, Wei; Wu, Maoyang; Fu, Junwei; Jiang, Yadong

    2010-10-01

    Hydrogenated amorphous silicon (a-Si:H) thin films doped with Phosphorus (P) and Nitrogen (N) were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). The optical band gaps of the thin films obtained through either changing the gas pressure (P-doped only) or adulterating nitrogen concentration (with fixed P content) were investigated by means of Ellipsometric and Ultraviolet-Visible (UV-Vis) spectroscopy, respectively. Tauc formula was used in calculating the optical band gaps of the thin films in both methods. The results show that Ellipsometry and UV-Vis spectrophotometry can be applied in the research of the optical properties of a-Si:H thin films experimentally. Both methods reflect the variation law of the optical band gaps caused by CVD process parameters, i.e., the optical band gap of the a-Si:H thin films is increased with the rise of the gas pressure or the nitrogen concentration respectively. The difference in optical band gaps of the doped a-Si:H thin films calculated by Ellipsometry or UV-Vis spectrophotometry are not so great that they both can be used to measure the optical band gaps of the thin films in practical applications.

  17. Gas Permeability and Permselectivity of Poly(L-Lactic Acid)/SiOx Film and Its Application in Equilibrium-Modified Atmosphere Packaging for Chilled Meat.

    PubMed

    Dong, Tungalag; Song, Shuxin; Liang, Min; Wang, Yu; Qi, Xiaojing; Zhang, Yuqin; Yun, Xueyan; Jin, Ye

    2017-01-01

    A layer of SiO x was deposited on the surface of poly(L-lactic acid) (PLLA) film to fabricate a PLLA/SiO x layered film, by plasma-enhanced chemical vapor deposition (PECVD) process. PLLA/SiO x film showed Young's modulus and tensile strength increased by 119.2% and 91.6%, respectively, over those of neat PLLA film. At 5 °C, the oxygen (O 2 ) and carbon dioxide (CO 2 ) permeability of PLLA/SiO x film decreased by 78.7% and 71.7%, respectively, and the CO 2 /O 2 permselectivity increased by 32.5%, compared to that of the neat PLLA film. When the PLLA/SiO x film was applied to the equilibrium-modified atmosphere packaging of chilled meat, the gas composition in packaging reached a dynamic equilibrium with 6% to 11% CO 2 and 8% to 13% O 2 . Combined with tea polyphenol pads, which effectively inhibited the microbial growth, the desirable color of meat was maintained and an extended shelf life of 52 d was achieved for the chilled meat. © 2016 Institute of Food Technologists®.

  18. Impact of Silicon Nanocrystal Oxidation on the Nonmetallic Growth of Carbon Nanotubes.

    PubMed

    Rocks, Conor; Mitra, Somak; Macias-Montero, Manuel; Maguire, Paul; Svrcek, Vladimir; Levchenko, Igor; Ostrikov, Kostya; Mariotti, Davide

    2016-07-27

    Carbon nanotube (CNT) growth has been demonstrated recently using a number of nonmetallic semiconducting and metal oxide nanoparticles, opening up pathways for direct CNT synthesis from a number of more desirable templates without the need for metallic catalysts. However, CNT growth mechanisms using these nonconventional catalysts has been shown to largely differ and reamins a challenging synthesis route. In this contribution we show CNT growth from partially oxidized silicon nanocrystals (Si NCs) that exhibit quantum confinement effects using a microwave plasma enhanced chemical vapor deposition (PECVD) method. On the basis of solvent and a postsynthesis frgamentation process, we show that oxidation of our Si NCs can be easily controlled. We determine experimentally and explain with theoretical simulations that the Si NCs morphology together with a necessary shell oxide of ∼1 nm is vital to allow for the nonmetallic growth of CNTs. On the basis of chemical analysis post-CNT-growth, we give insight into possible mechanisms for CNT nucleation and growth from our partially oxidized Si NCs. This contribution is of significant importance to the improvement of nonmetallic catalysts for CNT growth and the development of Si NC/CNT interfaces.

  19. In-line charge-trapping characterization of dielectrics for sub-0.5-um CMOS technologies

    NASA Astrophysics Data System (ADS)

    Roy, Pradip K.; Chacon, Carlos M.; Ma, Yi; Horner, Gregory

    1997-09-01

    The advent of ultra-large and giga-scale-integration (ULSI/GSI) has placed considerable emphasis on the development of new gate oxides and interlevel dielectrics capable of meeting strict performance and reliability requirements. The costs and demands associated with ULSI fabrication have in turn fueled the need for cost-effective, rapid and accurate in-line characterization techniques for evaluating dielectric quality. The use of non-contact surface photovoltage characterization techniques provides cost-effective rapid feedback on dielectric quality, reducing costs through the reutilization of control wafers and the elimination of processing time. This technology has been applied to characterize most of the relevant C-V parameters, including flatband voltage (Vfb), density of interface traps (Dit), mobile charge density (Qm), oxide thickness (Tox), oxide resistivity (pox) and total charge (Qtot) for gate and interlevel (ILO) oxides. A novel method of measuring tunneling voltage by this technique on various gate oxides is discussed. For ILO, PECVD and high density plasma dielectrics, surface voltage maps are also presented. Measurements of near-surface silicon quality are described, including minority carrier generation lifetime, and examples of their application in diagnosing manufacturing problems.

  20. A systematic optimization of design parameters in strained silicon waveguides to further enhance the linear electro-optic effect

    NASA Astrophysics Data System (ADS)

    Olivares, Irene; Angelova, Todora I.; Pinilla-Cienfuegos, Elena; Sanchis, Pablo

    2016-05-01

    The electro-optic Pockels effect may be generated in silicon photonics structures by breaking the crystal symmetry by means of a highly stressing cladding layer (typically silicon nitride, SiN) deposited on top of the silicon waveguide. In this work, the influence of the waveguide parameters on the strain distribution and its overlap with the optical mode to enhance the Pockels effect has been analyzed. The optimum waveguide structure have been designed based on the definition and quantification of a figure of merit. The fabrication of highly stressing SiN layers by PECVD has also been optimized to characterize the designed structures. The residual stress has been controlled during the growth process by analyzing the influence of the main deposition parameters. Therefore, two identical samples with low and high stress conditions were fabricated and electro-optically characterized to test the induced Pockels effect and the influence of carrier effects. Electro-optical modulation was only measured in the sample with the high stressing SiN layer that could be attributed to the Pockels effect. Nevertheless, the influence of carriers were also observed thus making necessary additional experiments to decouple both effects.

  1. Remote sensing of coal mine pollution in the upper Potomac River basin

    NASA Technical Reports Server (NTRS)

    1974-01-01

    A survey of remote sensing data pertinent to locating and monitoring sources of pollution resulting from surface and shaft mining operations was conducted in order to determine the various methods by which ERTS and aircraft remote sensing data can be used as a replacement for, or a supplement to traditional methods of monitoring coal mine pollution of the upper Potomac Basin. The gathering and analysis of representative samples of the raw and processed data obtained during the survey are described, along with plans to demonstrate and optimize the data collection processes.

  2. Impact of remote sensing upon the planning, management, and development of water resources

    NASA Technical Reports Server (NTRS)

    Castruccio, P. A.; Loats, H. L.; Fowler, T. R.; Frech, S. L.

    1975-01-01

    Principal water resources users were surveyed to determine the impact of remote data streams on hydrologic computer models. Analysis of responses demonstrated that: most water resources effort suitable to remote sensing inputs is conducted through federal agencies or through federally stimulated research; and, most hydrologic models suitable to remote sensing data are federally developed. Computer usage by major water resources users was analyzed to determine the trends of usage and costs for the principal hydrologic users/models. The laws and empirical relationships governing the growth of the data processing loads were described and applied to project the future data loads. Data loads for ERTS CCT image processing were computed and projected through the 1985 era.

  3. Mathematic modeling of the Earth's surface and the process of remote sensing

    NASA Technical Reports Server (NTRS)

    Balter, B. M.

    1979-01-01

    It is shown that real data from remote sensing of the Earth from outer space are not best suited to the search for optimal procedures with which to process such data. To work out the procedures, it was proposed that data synthesized with the help of mathematical modeling be used. A criterion for simularity to reality was formulated. The basic principles for constructing methods for modeling the data from remote sensing are recommended. A concrete method is formulated for modeling a complete cycle of radiation transformations in remote sensing. A computer program is described which realizes the proposed method. Some results from calculations are presented which show that the method satisfies the requirements imposed on it.

  4. Remote Neural Pendants In A Welding-Control System

    NASA Technical Reports Server (NTRS)

    Venable, Richard A.; Bucher, Joseph H.

    1995-01-01

    Neural network integrated circuits enhance functionalities of both remote terminals (called "pendants") and communication links, without necessitating installation of additional wires in links. Makes possible to incorporate many features into pendant, including real-time display of critical welding parameters and other process information, capability for communication between technician at pendant and host computer or technician elsewhere in system, and switches and potentiometers through which technician at pendant exerts remote control over such critical aspects of welding process as current, voltage, rate of travel, flow of gas, starting, and stopping. Other potential manufacturing applications include control of spray coating and of curing of composite materials. Potential nonmanufacturing uses include remote control of heating, air conditioning, and lighting in electrically noisy and otherwise hostile environments.

  5. Computer applications in remote sensing education

    NASA Technical Reports Server (NTRS)

    Danielson, R. L.

    1980-01-01

    Computer applications to instruction in any field may be divided into two broad generic classes: computer-managed instruction and computer-assisted instruction. The division is based on how frequently the computer affects the instructional process and how active a role the computer affects the instructional process and how active a role the computer takes in actually providing instruction. There are no inherent characteristics of remote sensing education to preclude the use of one or both of these techniques, depending on the computer facilities available to the instructor. The characteristics of the two classes are summarized, potential applications to remote sensing education are discussed, and the advantages and disadvantages of computer applications to the instructional process are considered.

  6. Bringing an ecological view of change to Landsat-based remote sensing

    Treesearch

    Robert E. Kennedy; Serge Andrefouet; Warren B. Cohen; Cristina Gomez; Patrick Griffiths; Martin Hais; Sean P. Healey; Eileen H. Helmer; Patrick Hostert; Mitchell B. Lyons; Garrett W. Meigs; Dirk Pflugmacher; Stuart R. Phinn; Scott L. Powell; Peter Scarth; Susmita Sen; Todd A. Schroeder; Annemarie Schneider; Ruth Sonnenschein; James E. Vogelmann; Michael A. Wulder; Zhe Zhu

    2014-01-01

    When characterizing the processes that shape ecosystems, ecologists increasingly use the unique perspective offered by repeat observations of remotely sensed imagery. However, the concept of change embodied in much of the traditional remote-sensing literature was primarily limited to capturing large or extreme changes occurring in natural systems, omitting many more...

  7. Feasibility study ASCS remote sensing/compliance determination system

    NASA Technical Reports Server (NTRS)

    Duggan, I. E.; Minter, T. C., Jr.; Moore, B. H.; Nosworthy, C. T.

    1973-01-01

    A short-term technical study was performed by the MSC Earth Observations Division to determine the feasibility of the proposed Agricultural Stabilization and Conservation Service Automatic Remote Sensing/Compliance Determination System. For the study, the term automatic was interpreted as applying to an automated remote-sensing system that includes data acquisition, processing, and management.

  8. Secure distribution for high resolution remote sensing images

    NASA Astrophysics Data System (ADS)

    Liu, Jin; Sun, Jing; Xu, Zheng Q.

    2010-09-01

    The use of remote sensing images collected by space platforms is becoming more and more widespread. The increasing value of space data and its use in critical scenarios call for adoption of proper security measures to protect these data against unauthorized access and fraudulent use. In this paper, based on the characteristics of remote sensing image data and application requirements on secure distribution, a secure distribution method is proposed, including users and regions classification, hierarchical control and keys generation, and multi-level encryption based on regions. The combination of the three parts can make that the same remote sensing images after multi-level encryption processing are distributed to different permission users through multicast, but different permission users can obtain different degree information after decryption through their own decryption keys. It well meets user access control and security needs in the process of high resolution remote sensing image distribution. The experimental results prove the effectiveness of the proposed method which is suitable for practical use in the secure transmission of remote sensing images including confidential information over internet.

  9. Remote Sensing Center

    NASA Technical Reports Server (NTRS)

    1973-01-01

    The applications are reported of new remote sensing techniques for earth resources surveys and environmental monitoring. Applications discussed include: vegetation systems, environmental monitoring, and plant protection. Data processing systems are described.

  10. Modeling, simulation, and analysis of optical remote sensing systems

    NASA Technical Reports Server (NTRS)

    Kerekes, John Paul; Landgrebe, David A.

    1989-01-01

    Remote Sensing of the Earth's resources from space-based sensors has evolved in the past 20 years from a scientific experiment to a commonly used technological tool. The scientific applications and engineering aspects of remote sensing systems have been studied extensively. However, most of these studies have been aimed at understanding individual aspects of the remote sensing process while relatively few have studied their interrelations. A motivation for studying these interrelationships has arisen with the advent of highly sophisticated configurable sensors as part of the Earth Observing System (EOS) proposed by NASA for the 1990's. Two approaches to investigating remote sensing systems are developed. In one approach, detailed models of the scene, the sensor, and the processing aspects of the system are implemented in a discrete simulation. This approach is useful in creating simulated images with desired characteristics for use in sensor or processing algorithm development. A less complete, but computationally simpler method based on a parametric model of the system is also developed. In this analytical model the various informational classes are parameterized by their spectral mean vector and covariance matrix. These class statistics are modified by models for the atmosphere, the sensor, and processing algorithms and an estimate made of the resulting classification accuracy among the informational classes. Application of these models is made to the study of the proposed High Resolution Imaging Spectrometer (HRIS). The interrelationships among observational conditions, sensor effects, and processing choices are investigated with several interesting results.

  11. JSC Pharmacy Services for Remote Operations

    NASA Technical Reports Server (NTRS)

    Stoner, Paul S.; Bayuse, Tina

    2005-01-01

    The Johnson Space Center Pharmacy began operating in March of 2003. The pharmacy serves in two main capacities: to directly provide medications and services in support of the medical clinics at the Johnson Space Center, physician travel kits for NASA flight surgeon staff, and remote operations, such as the clinics in Devon Island, Star City and Moscow; and indirectly provide medications and services for the International Space Station and Space Shuttle medical kits. Process changes that occurred and continued to evolve in the advent of the installation of the new JSC Pharmacy, and the process of stocking medications for each of these aforementioned areas will be discussed. Methods: The incorporation of pharmacy involvement to provide services for remote operations and supplying medical kits was evaluated. The first step was to review the current processes and work the JSC Pharmacy into the existing system. The second step was to provide medications to these areas. Considerations for the timeline of expiring medications for shipment are reviewed with each request. The third step was the development of a process to provide accountability for the medications. Results: The JSC Pharmacy utilizes a pharmacy management system to document all medications leaving the pharmacy. Challenges inherent to providing medications to remote areas were encountered. A process has been designed to incorporate usage into the electronic medical record upon return of the information from these remote areas. This is an evolving program and several areas have been identified for further improvement.

  12. Development of a fusion approach selection tool

    NASA Astrophysics Data System (ADS)

    Pohl, C.; Zeng, Y.

    2015-06-01

    During the last decades number and quality of available remote sensing satellite sensors for Earth observation has grown significantly. The amount of available multi-sensor images along with their increased spatial and spectral resolution provides new challenges to Earth scientists. With a Fusion Approach Selection Tool (FAST) the remote sensing community would obtain access to an optimized and improved image processing technology. Remote sensing image fusion is a mean to produce images containing information that is not inherent in the single image alone. In the meantime the user has access to sophisticated commercialized image fusion techniques plus the option to tune the parameters of each individual technique to match the anticipated application. This leaves the operator with an uncountable number of options to combine remote sensing images, not talking about the selection of the appropriate images, resolution and bands. Image fusion can be a machine and time-consuming endeavour. In addition it requires knowledge about remote sensing, image fusion, digital image processing and the application. FAST shall provide the user with a quick overview of processing flows to choose from to reach the target. FAST will ask for available images, application parameters and desired information to process this input to come out with a workflow to quickly obtain the best results. It will optimize data and image fusion techniques. It provides an overview on the possible results from which the user can choose the best. FAST will enable even inexperienced users to use advanced processing methods to maximize the benefit of multi-sensor image exploitation.

  13. Equivalent Sensor Radiance Generation and Remote Sensing from Model Parameters. Part 1; Equivalent Sensor Radiance Formulation

    NASA Technical Reports Server (NTRS)

    Wind, Galina; DaSilva, Arlindo M.; Norris, Peter M.; Platnick, Steven E.

    2013-01-01

    In this paper we describe a general procedure for calculating equivalent sensor radiances from variables output from a global atmospheric forecast model. In order to take proper account of the discrepancies between model resolution and sensor footprint the algorithm takes explicit account of the model subgrid variability, in particular its description of the probably density function of total water (vapor and cloud condensate.) The equivalent sensor radiances are then substituted into an operational remote sensing algorithm processing chain to produce a variety of remote sensing products that would normally be produced from actual sensor output. This output can then be used for a wide variety of purposes such as model parameter verification, remote sensing algorithm validation, testing of new retrieval methods and future sensor studies. We show a specific implementation using the GEOS-5 model, the MODIS instrument and the MODIS Adaptive Processing System (MODAPS) Data Collection 5.1 operational remote sensing cloud algorithm processing chain (including the cloud mask, cloud top properties and cloud optical and microphysical properties products.) We focus on clouds and cloud/aerosol interactions, because they are very important to model development and improvement.

  14. Multi-sensor Cloud Retrieval Simulator and Remote Sensing from Model Parameters . Pt. 1; Synthetic Sensor Radiance Formulation; [Synthetic Sensor Radiance Formulation

    NASA Technical Reports Server (NTRS)

    Wind, G.; DaSilva, A. M.; Norris, P. M.; Platnick, S.

    2013-01-01

    In this paper we describe a general procedure for calculating synthetic sensor radiances from variable output from a global atmospheric forecast model. In order to take proper account of the discrepancies between model resolution and sensor footprint, the algorithm takes explicit account of the model subgrid variability, in particular its description of the probability density function of total water (vapor and cloud condensate.) The simulated sensor radiances are then substituted into an operational remote sensing algorithm processing chain to produce a variety of remote sensing products that would normally be produced from actual sensor output. This output can then be used for a wide variety of purposes such as model parameter verification, remote sensing algorithm validation, testing of new retrieval methods and future sensor studies.We show a specific implementation using the GEOS-5 model, the MODIS instrument and the MODIS Adaptive Processing System (MODAPS) Data Collection 5.1 operational remote sensing cloud algorithm processing chain (including the cloud mask, cloud top properties and cloud optical and microphysical properties products). We focus on clouds because they are very important to model development and improvement.

  15. NDSI products system based on Hadoop platform

    NASA Astrophysics Data System (ADS)

    Zhou, Yan; Jiang, He; Yang, Xiaoxia; Geng, Erhui

    2015-12-01

    Snow is solid state of water resources on earth, and plays an important role in human life. Satellite remote sensing is significant in snow extraction with the advantages of cyclical, macro, comprehensiveness, objectivity, timeliness. With the continuous development of remote sensing technology, remote sensing data access to the trend of multiple platforms, multiple sensors and multiple perspectives. At the same time, in view of the remote sensing data of compute-intensive applications demand increase gradually. However, current the producing system of remote sensing products is in a serial mode, and this kind of production system is used for professional remote sensing researchers mostly, and production systems achieving automatic or semi-automatic production are relatively less. Facing massive remote sensing data, the traditional serial mode producing system with its low efficiency has been difficult to meet the requirements of mass data timely and efficient processing. In order to effectively improve the production efficiency of NDSI products, meet the demand of large-scale remote sensing data processed timely and efficiently, this paper build NDSI products production system based on Hadoop platform, and the system mainly includes the remote sensing image management module, NDSI production module, and system service module. Main research contents and results including: (1)The remote sensing image management module: includes image import and image metadata management two parts. Import mass basis IRS images and NDSI product images (the system performing the production task output) into HDFS file system; At the same time, read the corresponding orbit ranks number, maximum/minimum longitude and latitude, product date, HDFS storage path, Hadoop task ID (NDSI products), and other metadata information, and then create thumbnails, and unique ID number for each record distribution, import it into base/product image metadata database. (2)NDSI production module: includes the index calculation, production tasks submission and monitoring two parts. Read HDF images related to production task in the form of a byte stream, and use Beam library to parse image byte stream to the form of Product; Use MapReduce distributed framework to perform production tasks, at the same time monitoring task status; When the production task complete, calls remote sensing image management module to store NDSI products. (3)System service module: includes both image search and DNSI products download. To image metadata attributes described in JSON format, return to the image sequence ID existing in the HDFS file system; For the given MapReduce task ID, package several task output NDSI products into ZIP format file, and return to the download link (4)System evaluation: download massive remote sensing data and use the system to process it to get the NDSI products testing the performance, and the result shows that the system has high extendibility, strong fault tolerance, fast production speed, and the image processing results with high accuracy.

  16. PI2GIS: processing image to geographical information systems, a learning tool for QGIS

    NASA Astrophysics Data System (ADS)

    Correia, R.; Teodoro, A.; Duarte, L.

    2017-10-01

    To perform an accurate interpretation of remote sensing images, it is necessary to extract information using different image processing techniques. Nowadays, it became usual to use image processing plugins to add new capabilities/functionalities integrated in Geographical Information System (GIS) software. The aim of this work was to develop an open source application to automatically process and classify remote sensing images from a set of satellite input data. The application was integrated in a GIS software (QGIS), automating several image processing steps. The use of QGIS for this purpose is justified since it is easy and quick to develop new plugins, using Python language. This plugin is inspired in the Semi-Automatic Classification Plugin (SCP) developed by Luca Congedo. SCP allows the supervised classification of remote sensing images, the calculation of vegetation indices such as NDVI (Normalized Difference Vegetation Index) and EVI (Enhanced Vegetation Index) and other image processing operations. When analysing SCP, it was realized that a set of operations, that are very useful in teaching classes of remote sensing and image processing tasks, were lacking, such as the visualization of histograms, the application of filters, different image corrections, unsupervised classification and several environmental indices computation. The new set of operations included in the PI2GIS plugin can be divided into three groups: pre-processing, processing, and classification procedures. The application was tested consider an image from Landsat 8 OLI from a North area of Portugal.

  17. Characterization of plasma processing induced charging damage to MOS devices

    NASA Astrophysics Data System (ADS)

    Ma, Shawming

    1997-12-01

    Plasma processing has become an integral part of the fabrication of integrated circuits and takes at least 30% of whole process steps since it offers advantages in terms of directionality, low temperature and process convenience. However, wafer charging during plasma processes is a significant concern for both thin oxide damage and profile distortion. In this work, the factors affecting this damage will be explained by plasma issues, device structure and oxide quality. The SPORT (Stanford Plasma On-wafer Real Time) charging probe was developed to investigate the charging mechanism of different plasma processes including poly-Si etching, resist ashing and PECVD. The basic idea of this probe is that it simulates a real device structure in the plasma environment and allows measurement of plasma induced charging voltages and currents directly in real time. This measurement is fully compatible with other charging voltage measurement but it is the only one to do in real-time. Effect of magnetic field induced plasma nonuniformity on spatial dependent charging is well understood by this measurement. In addition, the plasma parameters including ion current density and electron temperature can also be extracted from the probe's plasma I-V characteristics using a dc Langmuir probe like theory. It will be shown that the MOS device tunneling current from charging, the dependence on antenna ratio and the etch uniformity can all be predicted by using this measurement. Moreover, the real-time measurement reveals transient and electrode edge effect during processing. Furthermore, high aspect ratio pattern induced electron shading effects can also be characterized by the probe. On the oxide quality issue, wafer temperature during plasma processing has been experimentally shown to be critical to charging damage. Finally, different MOS capacitor testing methods including breakdown voltage, charge-to-breakdown, gate leakage current and voltage-time at constant current bias were compared to find the optimum method for charging device reliability testing.

  18. Role of remote sensing in Bay measurements

    NASA Technical Reports Server (NTRS)

    Mugler, J. P., Jr.; Godfrey, J. P.; Hickman, G. D.; Hovis, W. G.; Pearson, A. O.; Weaver, K. N.

    1978-01-01

    Remote measurements of a number of surface or near surface parameters for baseline definition and specialized studies, remote measurements of episodic events, and remote measurements of the Bay lithosphere are considered in terms of characterizing and understanding the ecology of the Chesapeake Bay. Geologic processes and features best suited for information enhancement by remote sensing methods are identified. These include: (1) rates of sedimentation in the Bay; (2) rates of erosion of Bay shorelines; (3) spatial distribution and geometry of aquifers; (4) mapping of Karst terrain (sinkholes); and (5) mapping of fracture patterns. Recommendations for studying problem areas identified are given.

  19. Recent developments of x-ray lithography in Canada

    NASA Astrophysics Data System (ADS)

    Chaker, Mohamed; Boily, Stephane; Ginovker, A.; Jean, Alain; Kieffer, Jean-Claude; Mercier, P. P.; Pepin, Henri; Leung, Pak; Currie, John F.; Lafontaine, Hugues

    1991-08-01

    An overview of current activities in Canada is reported, including x-ray lithography studies based on laser plasma sources and x-ray mask development. In particular, the application of laser plasma sources for x-ray lithography is discussed, taking into account the industrial requirement and the present state of laser technology. The authors describe the development of silicon carbide membranes for x-ray lithography application. SiC films were prepared using either a 100 kHz plasma-enhanced chemical vapor deposition (PECVD) system or a laser ablation technique. These membranes have a relatively large diameter (> 1 in.) and a high optical transparency (> 50%). Experimental studies on stresses in tungsten films deposited with triode sputtering are reported.

  20. Highly conducting and preferred <220> oriented boron doped nc–Si films for window layers in nc–Si solar cells

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Mondal, Praloy; Das, Debajyoti, E-mail: erdd@iacs.res.in

    2016-05-23

    Growth and optimization of the boron dopednanocrystalline silicon (nc-Si) films have been studied by varyingthe gaspressure applied to the hydrogendiluted silane plasma in RF (13.56 MHz) plasma-enhanced chemical vapor deposition (PECVD) system, using diborane (B{sub 2}H{sub 6}) as the dopant gas. High magnitudeof electrical conductivity (~10{sup 2} S cm{sup −1}) and<220>orientedcrystallographic lattice planes have been obtained with high crystalline volume fraction (~86 %) at an optimum pressure of 2.5 Torr. XRD and Raman studies reveal good crystallinity with preferred orientation, suitable for applications in stacked layer devices, particularly in nc–Si solar cells.

  1. Solid coatings deposited from liquid methyl methacrylate via Plasma Polymerization

    NASA Astrophysics Data System (ADS)

    Wurlitzer, Lisa; Maus-Friedrichs, Wolfgang; Dahle, Sebastian

    2016-09-01

    The polymerization of methyl methacrylate via plasma discharges is well known today. Usually, plasma-enhanced chemical vapor deposition (PECVD) is used to deposit polymer coatings. Solid coatings are formed out of the liquid phase from methyl methacrylate via dielectric barrier discharge. The formation of the coating proceeds in the gas and the liquid phase. To learn more about the reactions in the two phases, the coatings from MMA monomer will be compared to those from MMA resin. Finally, attenuated total reflection infrared spectroscopy, confocal laser scanning microscopy and X-ray photoelectron spectroscopy are employed to characterize the solid coatings. In conclusion, the plasma enhanced chemical solution deposition is compared to the classical thermal polymerization of MMA.

  2. Use of high resolution remotely sensed evapotranspiration retrievals for calibration of a process-based hydrologic model in data-poor basins

    USDA-ARS?s Scientific Manuscript database

    Calibration of process-based hydrologic models is a challenging task in data-poor basins, where monitored hydrologic data are scarce. In this study, we present a novel approach that benefits from remotely sensed evapotranspiration (ET) data to calibrate a complex watershed model, namely the Soil and...

  3. Benefits from remote sensing data utilization in urban planning processes and system recommendations

    NASA Technical Reports Server (NTRS)

    Mallon, H. J.; Howard, J. Y.

    1972-01-01

    The benefits of utilizing remote sensor data in the urban planning process of the Metropolitan Washington Council of Governments are investigated. An evaluation of sensor requirements, a description/ comparison of costs, benefits, levels of accuracy, ease of attainment, and frequency of update possible using sensor versus traditional data acquisition techniques are discussed.

  4. Assessment of Spacecraft Operational Status Using Electro-Optical Predictive Techniques

    DTIC Science & Technology

    2010-09-01

    panel appendages, may require enhanced preflight characterization processes to support monitoring by passive, remote, nonimaging optical sensors...observing and characterizing key spacecraft features. The simulation results are based on electro-optical signatures apparent to nonimaging sensors, along...and communication equipment, may require enhanced preflight characterization processes to support monitoring by passive, remote, nonimaging optical

  5. Cooperative studies between the United States of America and the People's Republic of China on applications of remote sensing to surveying and mapping

    USGS Publications Warehouse

    Lauer, Donald T.; Chu, Liangcai

    1992-01-01

    A Protocol established between the National Bureau of Surveying and Mapping, People's Republic of China (PRC) and the U.S. Geological Survey, United States of America (US), resulted in the exchange of scientific personnel, technical training, and exploration of the processing of remotely sensed data. These activities were directed toward the application of remotely sensed data to surveying and mapping. Data were processed and various products were generated for the Black Hills area in the US and the Ningxiang area of the PRC. The results of these investigations defined applicable processes in the creation of satellite image maps, land use maps, and the use of ancillary data for further map enhancements.

  6. Development of data processing, interpretation and analysis system for the remote sensing of trace atmospheric gas species

    NASA Technical Reports Server (NTRS)

    Casas, Joseph C.; Saylor, Mary S.; Kindle, Earl C.

    1987-01-01

    The major emphasis is on the advancement of remote sensing technology. In particular, the gas filter correlation radiometer (GFCR) technique was applied to the measurement of trace gas species, such as carbon monoxide (CO), from airborne and Earth orbiting platforms. Through a series of low altitude aircraft flights, high altitude aircraft flights, and orbiting space platform flights, data were collected and analyzed, culminating in the first global map of carbon monoxide concentration in the middle troposphere and stratosphere. The four major areas of this remote sensing program, known as the Measurement of Air Pollution from Satellites (MAPS) experiment, are: (1) data acquisition, (2) data processing, analysis, and interpretation algorithms, (3) data display techniques, and (4) information processing.

  7. 76 FR 50753 - Agency Information Collections Activities; The Pecora Award; Application and Nomination Process

    Federal Register 2010, 2011, 2012, 2013, 2014

    2011-08-16

    ... groups that make outstanding contributions toward understanding the earth by means of remote sensing. The... motivating force behind the establishment of a program for civil remote sensing of the earth from space. The purpose of the award is to recognize individuals or groups working in the field of remote sensing of the...

  8. Using a remote sensing-based, percent tree cover map to enhance forest inventory estimation

    Treesearch

    Ronald E. McRoberts; Greg C. Liknes; Grant M. Domke

    2014-01-01

    For most national forest inventories, the variables of primary interest to users are forest area and growing stock volume. The precision of estimates of parameters related to these variables can be increased using remotely sensed auxiliary variables, often in combination with stratified estimators. However, acquisition and processing of large amounts of remotely sensed...

  9. Hand controller commonality evaluation process

    NASA Technical Reports Server (NTRS)

    Stuart, Mark A.; Bierschwale, John M.; Wilmington, Robert P.; Adam, Susan C.; Diaz, Manuel F.; Jensen, Dean G.

    1990-01-01

    A hand controller evaluation process has been developed to determine the appropriate hand controller configurations for supporting remotely controlled devices. These devices include remote manipulator systems (RMS), dexterous robots, and remotely-piloted free flyers. Standard interfaces were developed to evaluate six different hand controllers in three test facilities including dynamic computer simulations, kinematic computer simulations, and physical simulations. The hand controllers under consideration were six degree-of-freedom (DOF) position and rate minimaster and joystick controllers, and three-DOF rate controllers. Task performance data, subjective comments, and anthropometric data obtained during tests were used for controller configuration recommendations to the SSF Program.

  10. Evaluation of a New Remote Handling Design for High Throughput Annular Centrifugal Contactors

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    David H. Meikrantz; Troy G. Garn; Jack D. Law

    2009-09-01

    Advanced designs of nuclear fuel recycling plants are expected to include more ambitious goals for aqueous based separations including; higher separations efficiency, high-level waste minimization, and a greater focus on continuous processes to minimize cost and footprint. Therefore, Annular Centrifugal Contactors (ACCs) are destined to play a more important role for such future processing schemes. Previous efforts defined and characterized the performance of commercial 5 cm and 12.5 cm single-stage ACCs in a “cold” environment. The next logical step, the design and evaluation of remote capable pilot scale ACCs in a “hot” or radioactive environment was reported earlier. This reportmore » includes the development of remote designs for ACCs that can process the large throughput rates needed in future nuclear fuel recycling plants. Novel designs were developed for the remote interconnection of contactor units, clean-in-place and drain connections, and a new solids removal collection chamber. A three stage, 12.5 cm diameter rotor module has been constructed and evaluated for operational function and remote handling in highly radioactive environments. This design is scalable to commercial CINC ACC models from V-05 to V-20 with total throughput rates ranging from 20 to 650 liters per minute. The V-05R three stage prototype was manufactured by the commercial vendor for ACCs in the U.S., CINC mfg. It employs three standard V-05 clean-in-place (CIP) units modified for remote service and replacement via new methods of connection for solution inlets, outlets, drain and CIP. Hydraulic testing and functional checks were successfully conducted and then the prototype was evaluated for remote handling and maintenance suitability. Removal and replacement of the center position V-05R ACC unit in the three stage prototype was demonstrated using an overhead rail mounted PaR manipulator. This evaluation confirmed the efficacy of this innovative design for interconnecting and cleaning individual stages while retaining the benefits of commercially reliable ACC equipment for remote applications in the nuclear industry. Minor modifications and suggestions for improved manual remote servicing by the remote handling specialists were provided but successful removal and replacement was demonstrated in the first prototype.« less

  11. Data processing 1: Advancements in machine analysis of multispectral data

    NASA Technical Reports Server (NTRS)

    Swain, P. H.

    1972-01-01

    Multispectral data processing procedures are outlined beginning with the data display process used to accomplish data editing and proceeding through clustering, feature selection criterion for error probability estimation, and sample clustering and sample classification. The effective utilization of large quantities of remote sensing data by formulating a three stage sampling model for evaluation of crop acreage estimates represents an improvement in determining the cost benefit relationship associated with remote sensing technology.

  12. Restoration of color in a remote sensing image and its quality evaluation

    NASA Astrophysics Data System (ADS)

    Zhang, Zuxun; Li, Zhijiang; Zhang, Jianqing; Wang, Zhihe

    2003-09-01

    This paper is focused on the restoration of color remote sensing (including airborne photo). A complete approach is recommended. It propose that two main aspects should be concerned in restoring a remote sensing image, that are restoration of space information, restoration of photometric information. In this proposal, the restoration of space information can be performed by making the modulation transfer function (MTF) as degradation function, in which the MTF is obtained by measuring the edge curve of origin image. The restoration of photometric information can be performed by improved local maximum entropy algorithm. What's more, a valid approach in processing color remote sensing image is recommended. That is splits the color remote sensing image into three monochromatic images which corresponding three visible light bands and synthesizes the three images after being processed separately with psychological color vision restriction. Finally, three novel evaluation variables are obtained based on image restoration to evaluate the image restoration quality in space restoration quality and photometric restoration quality. An evaluation is provided at last.

  13. Single transmission line interrogated multiple channel data acquisition system

    DOEpatents

    Fasching, George E.; Keech, Jr., Thomas W.

    1980-01-01

    A single transmission line interrogated multiple channel data acquisition system is provided in which a plurality of remote station/sensor circuits each monitors a specific process variable and each transmits measurement values over a single transmission line to a master interrogating station when addressed by said master interrogating station. Typically, as many as 330 remote stations may be parallel connected to the transmission line which may exceed 7,000 feet. The interrogation rate is typically 330 stations/second. The master interrogating station samples each station according to a shared, charging transmit-receive cycle. All remote station address signals, all data signals from the remote stations/sensors and all power for all of the remote station/sensors are transmitted via a single continuous terminated coaxial cable. A means is provided for periodically and remotely calibrating all remote sensors for zero and span. A provision is available to remotely disconnect any selected sensor station from the main transmission line.

  14. Thematic Conference on Geologic Remote Sensing, 8th, Denver, CO, Apr. 29-May 2, 1991, Proceedings. Vols. 1 & 2

    NASA Technical Reports Server (NTRS)

    1991-01-01

    The proceedings contain papers discussing the state-of-the-art exploration, engineering, and environmental applications of geologic remote sensing, along with the research and development activities aimed at increasing the future capabilities of this technology. The following topics are addressed: spectral geology, U.S. and international hydrocarbon exporation, radar and thermal infrared remote sensing, engineering geology and hydrogeology, mineral exploration, remote sensing for marine and environmental applications, image processing and analysis, geobotanical remote sensing, and data integration and geographic information systems. Particular attention is given to spectral alteration mapping with imaging spectrometers, mapping the coastal plain of the Congo with airborne digital radar, applications of remote sensing techniques to the assessment of dam safety, remote sensing of ferric iron minerals as guides for gold exploration, principal component analysis for alteration mappping, and the application of remote sensing techniques for gold prospecting in the north Fujian province.

  15. Multi-scale remote sensing of coral reefs

    USGS Publications Warehouse

    Andréfouët, Serge; Hochberg, E.J.; Chevillon, Christophe; Muller-Karger, Frank E.; Brock, John C.; Hu, Chuanmin

    2005-01-01

    In this chapter we present how both direct and indirect remote sensing can be integrated to address two major coral reef applications - coral bleaching and assessment of biodiversity. This approach reflects the current non-linear integration of remote sensing for environmental assessment of coral reefs, resulting from a rapid increase in available sensors, processing methods and interdisciplinary collaborations (Andréfouët and Riegl, 2004). Moreover, this approach has greatly benefited from recent collaborations of once independent investigations (e.g., benthic ecology, remote sensing, and numerical modeling).

  16. Remote sensing program

    NASA Technical Reports Server (NTRS)

    Philipson, W. R. (Principal Investigator)

    1983-01-01

    Built on Cornell's thirty years of experience in aerial photographic studies, the NASA-sponsored remote sensing program strengthened instruction and research in remote sensing, established communication links within and beyond the university community, and conducted research projects for or with town, county, state, federal, and private organizations in New York State. The 43 completed applied research projects are listed as well as 13 spinoff grants/contracts. The curriculum offered, consultations provided, and data processing facilities available are described. Publications engendered are listed including the thesis of graduates in the remote sensing program.

  17. Development of mathematical techniques for the assimilation of remote sensing data into atmospheric models

    NASA Technical Reports Server (NTRS)

    Seinfeld, J. H. (Principal Investigator)

    1982-01-01

    The problem of the assimilation of remote sensing data into mathematical models of atmospheric pollutant species was investigated. The data assimilation problem is posed in terms of the matching of spatially integrated species burden measurements to the predicted three-dimensional concentration fields from atmospheric diffusion models. General conditions were derived for the reconstructability of atmospheric concentration distributions from data typical of remote sensing applications, and a computational algorithm (filter) for the processing of remote sensing data was developed.

  18. Development of mathematical techniques for the assimilation of remote sensing data into atmospheric models

    NASA Technical Reports Server (NTRS)

    Seinfeld, J. H. (Principal Investigator)

    1982-01-01

    The problem of the assimilation of remote sensing data into mathematical models of atmospheric pollutant species was investigated. The problem is posed in terms of the matching of spatially integrated species burden measurements to the predicted three dimensional concentration fields from atmospheric diffusion models. General conditions are derived for the "reconstructability' of atmospheric concentration distributions from data typical of remote sensing applications, and a computational algorithm (filter) for the processing of remote sensing data is developed.

  19. High speed polling protocol for multiple node network with sequential flooding of a polling message and a poll-answering message

    NASA Technical Reports Server (NTRS)

    Marvit, Maclen (Inventor); Kirkham, Harold (Inventor)

    1995-01-01

    The invention is a multiple interconnected network of intelligent message-repeating remote nodes which employs a remote node polling process performed by a master node by transmitting a polling message generically addressed to all remote nodes associated with the master node. Each remote node responds upon receipt of the generically addressed polling message by sequentially flooding the network with a poll-answering informational message and with the polling message.

  20. Monitoring Freeze-Thaw States in the Pan-Arctic: Application of Microwave Remote Sensing to Monitoring Hydrologic and Ecological Processes

    NASA Astrophysics Data System (ADS)

    McDonald, K. C.; Kimball, J. S.

    2004-12-01

    The transition of the landscape between predominantly frozen and non-frozen conditions in seasonally frozen environments impacts climate, hydrological, ecological and biogeochemical processes profoundly. Satellite microwave remote sensing is uniquely capable of detecting and monitoring a range of related biophysical processes associated with the measurement of landscape freeze/thaw status. We present the development, physical basis, current techniques and selected hydrological applications of satellite-borne microwave remote sensing of landscape freeze/thaw states for the terrestrial cryosphere. Major landscape hydrological processes embracing the remotely-sensed freeze/thaw signal include timing and spatial dynamics of seasonal snowmelt and associated soil thaw, runoff generation and flooding, ice breakup in large rivers and lakes, and timing and length of vegetation growing seasons and associated productivity and trace gas exchange. Employing both active and passive microwave sensors, we apply a selection of temporal change classification algorithms to examine a variety of hydrologic processes. We investigate contemporaneous and retrospective applications of the QuikSCAT scatterometer, and the SSM/I and SMMR radiometers to this end. Results illustrate the strong correspondence between regional thawing, seasonal ice break up for rivers, and the springtime pulse in river flow. We present the physical principles of microwave sensitivity to landscape freeze/thaw state, recent progress in applying these principles toward satellite remote sensing of freeze/thaw processes over broad regions, and potential for future global monitoring of this significant phenomenon of the global cryosphere. This work was carried out at the Jet Propulsion Laboratory, California Institute of Technology, and at the University of Montana, Missoula, under contract to the National Aeronautics and Space Administration.

  1. Remote sensing procurement package: A management report for state and local governments

    NASA Technical Reports Server (NTRS)

    1981-01-01

    An overview of the remote sensing procurement process is presented for chief executives, senior administrators, and other local and state officials responsible for purchasing remote sensing products, services, or equipment. Guidelines are provided for planning, organizing, staffing, and implementing such a procurement project. Other sections of the four-volume package are described and their benefits examined.

  2. The ASPRS Remote Sensing Industry Forecast: Phase II & III - Digital Sensor Compilation

    NASA Technical Reports Server (NTRS)

    Mondello, Charles

    2007-01-01

    In August 1999, ASPRS and NASA's (then) Commercial Remote Sensing Program (CRSP) entered into a 5-year Space Act Agreement (SAA), combining resources and expertise to: (a) Baseline the Remote Sensing Industry (RSI) based on GEIA Model; (b) Develop a 10-Year RSI market forecast and attendant processes; and (c) Provide improved information for decision makers.

  3. FLOOR PLAN OF MAIN PROCESSING BUILDING (CPP601), FIRST FLOOR SHOWING ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    FLOOR PLAN OF MAIN PROCESSING BUILDING (CPP-601), FIRST FLOOR SHOWING SAMPLE CORRIDORS AND EIGHTEEN CELLS AND ADJOINING REMOTE ANALYTICAL FACILITY (CPP-627) SHOWING REMOTE ANALYTICAL FACILITIES LAB, DECONTAMINATION ROOM, AND MULTICURIE CELL ROOM. TO LEFT ARE LABORATORY BUILDING (CPP-602) AND MAINTENANCE BUILDING (CPP-630). INL DRAWING NUMBER 200-0601-00-706-051979. ALTERNATE ID NUMBER CPP-E-1979. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  4. Architecture of COOPTO Remote Voting Solution

    NASA Astrophysics Data System (ADS)

    Silhavy, Radek; Silhavy, Petr; Prokopova, Zdenka

    This contribution focuses on investigation of remote electronic voting system, named COOPTO. Researching of suitability of electronic voting solution is forced by necessity of the improvement election process. The COOPTO is based on topical investigation of voting process and their implementation of using modern information and communication technology. The COOPTO allows voters, who are not in their election district, to participate in the democracy process. The aim of this contribution is to describe results of the development of the COOPTO solutions.

  5. Multiple channel optical data acquisition system

    DOEpatents

    Fasching, G.E.; Goff, D.R.

    1985-02-22

    A multiple channel optical data acquisition system is provided in which a plurality of remote sensors monitoring specific process variable are interrogated by means of a single optical fiber connecting the remote station/sensors to a base station. The remote station/sensors derive all power from light transmitted through the fiber from the base station. Each station/sensor is individually accessed by means of a light modulated address code sent over the fiber. The remote station/sensors use a single light emitting diode to both send and receive light signals to communicate with the base station and provide power for the remote station. The system described can power at least 100 remote station/sensors over an optical fiber one mile in length.

  6. Multilevel Dual Damascene copper interconnections

    NASA Astrophysics Data System (ADS)

    Lakshminarayanan, S.

    Copper has been acknowledged as the interconnect material for future generations of ICs to overcome the bottlenecks on speed and reliability present with the current Al based wiring. A new set of challenges brought to the forefront when copper replaces aluminum, have to be met and resolved to make it a viable option. Unit step processes related to copper technology have been under development for the last few years. In this work, the application of copper as the interconnect material in multilevel structures with SiO2 as the interlevel dielectric has been explored, with emphasis on integration issues and complete process realization. Interconnect definition was achieved by the Dual Damascene approach using chemical mechanical polishing of oxide and copper. The choice of materials used as adhesion promoter/diffusion barrier included Ti, Ta and CVD TiN. Two different polish chemistries (NH4OH or HNO3 based) were used to form the interconnects. The diffusion barrier was removed during polishing (in the case of TiN) or by a post CMP etch (as with Ti or Ta). Copper surface passivation was performed using boron implantation and PECVD nitride encapsulation. The interlevel dielectric way composed of a multilayer stack of PECVD SiO2 and SixNy. A baseline process sequence which ensured the mechanical and thermal compatibility of the different unit steps was first created. A comprehensive test vehicle was designed and test structures were fabricated using the process flow developed. Suitable modifications were subsequently introduced in the sequence as and when processing problems were encountered. Electrical characterization was performed on the fabricated devices, interconnects, contacts and vias. The structures were subjected to thermal stressing to assess their stability and performance. The measurement of interconnect sheet resistances revealed lower copper loss due to dishing on samples polished using HNO3 based slurry. Interconnect resistances remained stable upto 400oC, 500oC and 600oC for Ti, TiN and Ta barriers respectively. Via resistivity on the order of 10-9/ /Omegacm2 was measured for Cu/Ta/Cu interfaces and no degradation in the via resistance was observed upto 600oC on the 2 μm and 3 μm wide contact windows. Characterization of diode leakage and subthreshold currents of CMOS transistors fabricated with Ta adhesion layers, showed the failure of the Ta barrier at 450oC. Despite the good barrier performance of the CVD TiN films, obtaining low contact resistivity may be a concern. The potential use of Cu-Mg alloy as the backend metallization has also been studied. Fully encapsulated wiring has been fabricated by causing the Mg to out- diffuse towards the Cu/SiO2 interfaces and the free copper surface. The inter-connects exhibited good stability and oxidation resistance, but via resistances were extremely high, probably due to the presence of insulating films like MgO or MgF2 at the interface between the two metal levels. It may be possible to decrease the via resistance to values comparable to Cu/Ta/Cu by altering the process flow and using a suitable via clean. When used at the contact level, undesirable interaction with the CoSi2 film was observed at temperatures as low as 350oC. Another problem was the high contact resistance at the Cu-Mg/CoSi2 interface. Hence the use of this alloy as a contact fill material is not feasible at this time. An additional barrier layer may be required between the Cu-Mg and CoSi2 films to protect the integrity of the silicide and provide low contact resistance.

  7. The application of remote sensing to resource management and environmental quality programs in Kansas

    NASA Technical Reports Server (NTRS)

    Barr, B. G.; Martinko, E. A. (Principal Investigator)

    1983-01-01

    The activities of the Kansas Applied Remote Sensing (KARS) Program during the period April 1, 1982 through Marsh 31, 1983 are described. The most important work revolved around the Kansas Interagency Task Force on Applied Remote Sensing and its efforts to establish an operational service oriented remote sensing program in Kansas state government. Concomitant with this work was the upgrading of KARS capabilities to process data for state agencies through the vehicle of a low cost digital data processing system. The KARS Program continued to take an active role in irrigation mapping. KARS is now integrating data acquired through analysis of LANDSAT into geographic information systems designed for evaluating groundwater resources. KARS also continues to work at the national level on the national inventory of state natural resources information systems.

  8. Multiscale and Multitemporal Urban Remote Sensing

    NASA Astrophysics Data System (ADS)

    Mesev, V.

    2012-07-01

    The remote sensing of urban areas has received much attention from scientists conducting studies on measuring sprawl, congestion, pollution, poverty, and environmental encroachment. Yet much of the research is case and data-specific where results are greatly influenced by prevailing local conditions. There seems to be a lack of epistemological links between remote sensing and conventional theoretical urban geography; in other words, an oversight for the appreciation of how urban theory fuels urban change and how urban change is measured by remotely sensed data. This paper explores basic urban theories such as centrality, mobility, materiality, nature, public space, consumption, segregation and exclusion, and how they can be measured by remote sensing sources. In particular, the link between structure (tangible objects) and function (intangible or immaterial behavior) is addressed as the theory that supports the wellknow contrast between land cover and land use classification from remotely sensed data. The paper then couches these urban theories and contributions from urban remote sensing within two analytical fields. The first is the search for an "appropriate" spatial scale of analysis, which is conveniently divided between micro and macro urban remote sensing for measuring urban structure, understanding urban processes, and perhaps contributions to urban theory at a variety of scales of analysis. The second is on the existence of a temporal lag between materiality of urban objects and the planning process that approved their construction, specifically how time-dependence in urban structural-functional models produce temporal lags that alter the causal links between societal and political functional demands and structural ramifications.

  9. The Hico Image Processing System: A Web-Accessible Hyperspectral Remote Sensing Toolbox

    NASA Astrophysics Data System (ADS)

    Harris, A. T., III; Goodman, J.; Justice, B.

    2014-12-01

    As the quantity of Earth-observation data increases, the use-case for hosting analytical tools in geospatial data centers becomes increasingly attractive. To address this need, HySpeed Computing and Exelis VIS have developed the HICO Image Processing System, a prototype cloud computing system that provides online, on-demand, scalable remote sensing image processing capabilities. The system provides a mechanism for delivering sophisticated image processing analytics and data visualization tools into the hands of a global user community, who will only need a browser and internet connection to perform analysis. Functionality of the HICO Image Processing System is demonstrated using imagery from the Hyperspectral Imager for the Coastal Ocean (HICO), an imaging spectrometer located on the International Space Station (ISS) that is optimized for acquisition of aquatic targets. Example applications include a collection of coastal remote sensing algorithms that are directed at deriving critical information on water and habitat characteristics of our vulnerable coastal environment. The project leverages the ENVI Services Engine as the framework for all image processing tasks, and can readily accommodate the rapid integration of new algorithms, datasets and processing tools.

  10. Estimating costs and performance of systems for machine processing of remotely sensed data

    NASA Technical Reports Server (NTRS)

    Ballard, R. J.; Eastwood, L. F., Jr.

    1977-01-01

    This paper outlines a method for estimating computer processing times and costs incurred in producing information products from digital remotely sensed data. The method accounts for both computation and overhead, and may be applied to any serial computer. The method is applied to estimate the cost and computer time involved in producing Level II Land Use and Vegetative Cover Maps for a five-state midwestern region. The results show that the amount of data to be processed overloads some example computer systems, but that the processing is feasible on others.

  11. An Image Retrieval and Processing Expert System for the World Wide Web

    NASA Technical Reports Server (NTRS)

    Rodriguez, Ricardo; Rondon, Angelica; Bruno, Maria I.; Vasquez, Ramon

    1998-01-01

    This paper presents a system that is being developed in the Laboratory of Applied Remote Sensing and Image Processing at the University of P.R. at Mayaguez. It describes the components that constitute its architecture. The main elements are: a Data Warehouse, an Image Processing Engine, and an Expert System. Together, they provide a complete solution to researchers from different fields that make use of images in their investigations. Also, since it is available to the World Wide Web, it provides remote access and processing of images.

  12. Environmental mapping and monitoring of Iceland by remote sensing (EMMIRS)

    NASA Astrophysics Data System (ADS)

    Pedersen, Gro B. M.; Vilmundardóttir, Olga K.; Falco, Nicola; Sigurmundsson, Friðþór S.; Rustowicz, Rose; Belart, Joaquin M.-C.; Gísladóttir, Gudrun; Benediktsson, Jón A.

    2016-04-01

    Iceland is exposed to rapid and dynamic landscape changes caused by natural processes and man-made activities, which impact and challenge the country. Fast and reliable mapping and monitoring techniques are needed on a big spatial scale. However, currently there is lack of operational advanced information processing techniques, which are needed for end-users to incorporate remote sensing (RS) data from multiple data sources. Hence, the full potential of the recent RS data explosion is not being fully exploited. The project Environmental Mapping and Monitoring of Iceland by Remote Sensing (EMMIRS) bridges the gap between advanced information processing capabilities and end-user mapping of the Icelandic environment. This is done by a multidisciplinary assessment of two selected remote sensing super sites, Hekla and Öræfajökull, which encompass many of the rapid natural and man-made landscape changes that Iceland is exposed to. An open-access benchmark repository of the two remote sensing supersites is under construction, providing high-resolution LIDAR topography and hyperspectral data for land-cover and landform classification. Furthermore, a multi-temporal and multi-source archive stretching back to 1945 allows a decadal evaluation of landscape and ecological changes for the two remote sensing super sites by the development of automated change detection techniques. The development of innovative pattern recognition and machine learning-based approaches to image classification and change detection is one of the main tasks of the EMMIRS project, aiming to extract and compute earth observation variables as automatically as possible. Ground reference data collected through a field campaign will be used to validate the implemented methods, which outputs are then inferred with geological and vegetation models. Here, preliminary results of an automatic land-cover classification based on hyperspectral image analysis are reported. Furthermore, the EMMIRS project investigates the complex landscape dynamics between geological and ecological processes. This is done through cross-correlation of mapping results and implementation of modelling techniques that simulate geological and ecological processes in order to extrapolate the landscape evolution

  13. Role of SiNx Barrier Layer on the Performances of Polyimide Ga2O3-doped ZnO p-i-n Hydrogenated Amorphous Silicon Thin Film Solar Cells

    PubMed Central

    Wang, Fang-Hsing; Kuo, Hsin-Hui; Yang, Cheng-Fu; Liu, Min-Chu

    2014-01-01

    In this study, silicon nitride (SiNx) thin films were deposited on polyimide (PI) substrates as barrier layers by a plasma enhanced chemical vapor deposition (PECVD) system. The gallium-doped zinc oxide (GZO) thin films were deposited on PI and SiNx/PI substrates at room temperature (RT), 100 and 200 °C by radio frequency (RF) magnetron sputtering. The thicknesses of the GZO and SiNx thin films were controlled at around 160 ± 12 nm and 150 ± 10 nm, respectively. The optimal deposition parameters for the SiNx thin films were a working pressure of 800 × 10−3 Torr, a deposition power of 20 W, a deposition temperature of 200 °C, and gas flowing rates of SiH4 = 20 sccm and NH3 = 210 sccm, respectively. For the GZO/PI and GZO-SiNx/PI structures we had found that the GZO thin films deposited at 100 and 200 °C had higher crystallinity, higher electron mobility, larger carrier concentration, smaller resistivity, and higher optical transmittance ratio. For that, the GZO thin films deposited at 100 and 200 °C on PI and SiNx/PI substrates with thickness of ~000 nm were used to fabricate p-i-n hydrogenated amorphous silicon (α-Si) thin film solar cells. 0.5% HCl solution was used to etch the surfaces of the GZO/PI and GZO-SiNx/PI substrates. Finally, PECVD system was used to deposit α-Si thin film onto the etched surfaces of the GZO/PI and GZO-SiNx/PI substrates to fabricate α-Si thin film solar cells, and the solar cells’ properties were also investigated. We had found that substrates to get the optimally solar cells’ efficiency were 200 °C-deposited GZO-SiNx/PI. PMID:28788494

  14. PECVD based silicon oxynitride thin films for nano photonic on chip interconnects applications.

    PubMed

    Sharma, Satinder K; Barthwal, Sumit; Singh, Vikram; Kumar, Anuj; Dwivedi, Prabhat K; Prasad, B; Kumar, Dinesh

    2013-01-01

    Thin silicon oxynitride (SiO(x)N(y)) films were deposited by low temperature (~300°C) plasma enhanced chemical vapour deposition (PECVD), using SiH(4), N(2)O, NH(3) precursor of the flow rate 25, 100, 30 sccm and subjected to the post deposition annealing (PDA) treatment at 400°C and 600°C for nano optical/photonics on chip interconnects applications. AFM result reveals the variation of roughness from 60.9 Å to 23.4 Å after PDA treatment with respect to the as-deposited films, favourable surface topography for integrated waveguide applications. A model of decrease in island height with the effect of PDA treatment is proposed in support of AFM results. Raman spectroscopy and FTIR measurements are performed in order to define the change in crystallite and chemical bonding of as-deposited as well as PDA treated samples. These outcomes endorsed to the densification of SiO(x)N(y) thin films, due to decrease in Si-N and Si-O bonds strain, as well the O-H, N-H bonds with in oxynitride network. The increase in refractive index and PL intensity of as deposited SiO(x)N(y) thin films to the PDA treated films at 400°C and 600°C are observed. The significant shift of PL spectra peak positions indicate the change in cluster size as the result of PDA treatment, which influence the optical properties of thin films. It might be due to out diffusion of hydrogen containing species from silicon oxynitride films after PDA treatment. In this way, the structural and optical, feasibility of SiO(x)N(y) films are demonstrated in order to obtain high quality thin films for nano optical/photonics on chip interconnects applications. Copyright © 2012 Elsevier Ltd. All rights reserved.

  15. Multi-crop area estimation and mapping on a microprocessor/mainframe network

    NASA Technical Reports Server (NTRS)

    Sheffner, E.

    1985-01-01

    The data processing system is outlined for a 1985 test aimed at determining the performance characteristics of area estimation and mapping procedures connected with the California Cooperative Remote Sensing Project. The project is a joint effort of the USDA Statistical Reporting Service-Remote Sensing Branch, the California Department of Water Resources, NASA-Ames Research Center, and the University of California Remote Sensing Research Program. One objective of the program was to study performance when data processing is done on a microprocessor/mainframe network under operational conditions. The 1985 test covered the hardware, software, and network specifications and the integration of these three components. Plans for the year - including planned completion of PEDITOR software, testing of software on MIDAS, and accomplishment of data processing on the MIDAS-VAX-CRAY network - are discussed briefly.

  16. A new hyperspectral image compression paradigm based on fusion

    NASA Astrophysics Data System (ADS)

    Guerra, Raúl; Melián, José; López, Sebastián.; Sarmiento, Roberto

    2016-10-01

    The on-board compression of remote sensed hyperspectral images is an important task nowadays. One of the main difficulties is that the compression of these images must be performed in the satellite which carries the hyperspectral sensor. Hence, this process must be performed by space qualified hardware, having area, power and speed limitations. Moreover, it is important to achieve high compression ratios without compromising the quality of the decompress image. In this manuscript we proposed a new methodology for compressing hyperspectral images based on hyperspectral image fusion concepts. The proposed compression process has two independent steps. The first one is to spatially degrade the remote sensed hyperspectral image to obtain a low resolution hyperspectral image. The second step is to spectrally degrade the remote sensed hyperspectral image to obtain a high resolution multispectral image. These two degraded images are then send to the earth surface, where they must be fused using a fusion algorithm for hyperspectral and multispectral image, in order to recover the remote sensed hyperspectral image. The main advantage of the proposed methodology for compressing remote sensed hyperspectral images is that the compression process, which must be performed on-board, becomes very simple, being the fusion process used to reconstruct image the more complex one. An extra advantage is that the compression ratio can be fixed in advanced. Many simulations have been performed using different fusion algorithms and different methodologies for degrading the hyperspectral image. The results obtained in the simulations performed corroborate the benefits of the proposed methodology.

  17. Photonic qubits for remote quantum information processing

    NASA Astrophysics Data System (ADS)

    Maunz, P.; Olmschenk, S.; Hayes, D.; Matsukevich, D. N.; Duan, L.-M.; Monroe, C.

    2009-05-01

    Quantum information processing between remote quantum memories relies on a fast and faithful quantum channel. Recent experiments employed both, the photonic polarization and frequency qubits, in order to entangle remote atoms [1, 2], to teleport quantum information [3] and to operate a quantum gate between distant atoms. Here, we compare the dierent schemes used in these experiments and analyze the advantages of the dierent choices of atomic and photonic qubits and their coherence properties. [4pt] [1] D. L. Moehring et al. Nature 449, 68 (2007).[0pt] [2] D. N. Matsukevich et al. Phys. Rev. Lett. 100, 150404 2008).[0pt] [3] S. Olmschenk et al. Science, 323, 486 (2009).

  18. SFG analysis of the molecular structures at the surfaces and buried interfaces of PECVD ultralow-dielectric constant pSiCOH: Reactive ion etching and dielectric recovery

    NASA Astrophysics Data System (ADS)

    Myers, John N.; Zhang, Xiaoxian; Huang, Huai; Shobha, Hosadurga; Grill, Alfred; Chen, Zhan

    2017-05-01

    Molecular structures at the surface and buried interface of an amorphous ultralow-k pSiCOH dielectric film were quantitatively characterized before and after reactive ion etching (RIE) and subsequent dielectric repair using sum frequency generation (SFG) vibrational spectroscopy and Auger electron spectroscopy. SFG results indicated that RIE treatment of the pSiCOH film resulted in a depletion of ˜66% of the surface methyl groups and changed the orientation of surface methyl groups from ˜47° to ˜40°. After a dielectric recovery process that followed the RIE treatment, the surface molecular structure was dominated by methyl groups with an orientation of ˜55° and the methyl surface coverage at the repaired surface was 271% relative to the pristine surface. Auger depth profiling indicated that the RIE treatment altered the top ˜25 nm of the film and that the dielectric recovery treatment repaired the top ˜9 nm of the film. Both SFG and Auger profiling results indicated that the buried SiCNH/pSiCOH interface was not affected by the RIE or the dielectric recovery process. Beyond characterizing low-k materials, the developed methodology is general and can be used to distinguish and characterize different molecular structures and elemental compositions at the surface, in the bulk, and at the buried interface of many different polymer or organic thin films.

  19. Levee Monitoring with Radar Remote Sensing

    NASA Technical Reports Server (NTRS)

    Jones, Cathleen E.

    2012-01-01

    Topics in this presentation are: 1. Overview of radar remote sensing 2. Surface change detection with Differential Interferometric Radar Processing 3. Study of the Sacramento - San Joaquin levees 4. Mississippi River Levees during the Spring 2011 floods.

  20. A Retrospective Evaluation of Remote Pharmacist Interventions in a Telepharmacy Service Model Using a Conceptual Framework

    PubMed Central

    Murante, Lori J.; Moffett, Lisa M.

    2014-01-01

    Abstract Objectives: This retrospective cross-sectional study evaluated a telepharmacy service model using a conceptual framework to compare documented remote pharmacist interventions by year, hospital, and remote pharmacist and across rural hospitals with or without an on-site rural hospital pharmacist. Materials and Methods: Documented remote pharmacist interventions for patients at eight rural hospitals in the Midwestern United States during prospective prescription order review/entry from 2008 to 2011 were extracted from RxFusion® database (a home-grown system, i.e., internally developed program at The Nebraska Medical Center (TNMC) for capturing remote pharmacist-documented intervention data). The study authors conceptualized an analytical framework, mapping the 37 classes of remote pharmacist interventions to three broader-level definitions: (a) intervention, eight categories (interaction/potential interaction, contraindication, adverse effects, anticoagulation monitoring, drug product selection, drug regimen, summary, and recommendation), (b) patient medication management, two categories (therapy review and action), and (c) health system-centered medication use process, four categories (prescribing, transcribing and documenting, administering, and monitoring). Frequencies of intervention levels were compared by year, hospital, remote pharmacist, and hospital pharmacy status (with a remote pharmacist and on-site pharmacist or with a remote pharmacist only) using chi-squared test and univariate logistic regression analyses, as appropriate. Results: For 450,000 prescription orders 19,222 remote pharmacist interventions were documented. Frequency of interventions significantly increased each year (36% in 2009, 55% in 2010, and 7% in 2011) versus the baseline year (2008, 3%) when service started. The frequency of interventions also differed significantly across the eight hospitals and 16 remote pharmacists for the three defined intervention levels and categories. Remote pharmacist interventions at hospitals with an on-site and remote pharmacist (n=12,141) versus those with a remote pharmacist alone (n=7,081) were significantly more likely to be (1) patient-centered, (2) related to “actionable” medication management recommendations (unadjusted odds ratio [OR]=1.12), and (3) related to the “transcribing” (OR=1.47) and “prescribing” (OR=1.40) steps of the health system-centered medication use process level (all p<0.01). Conclusions: This is one of the first studies to demonstrate the patient- and health system-centered nature of pharmaceutical care delivered via a telepharmacy service model by evaluating documented remote pharmacist interventions with an analytical framework. PMID:24611489

  1. Remote access and automation of SPring-8 MX beamlines

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Ueno, Go, E-mail: ueno@spring8.or.jp; Hikima, Takaaki; Yamashita, Keitaro

    At SPring-8 MX beamlines, a remote access system has been developed and started user operation in 2010. The system has been developed based on an automated data collection and data management architecture utilized for the confirmed scheme of SPring-8 mail-in data collection. Currently, further improvement to the remote access and automation which covers data processing and analysis are being developed.

  2. Up Close from Afar: Using Remote Sensing To Teach the American Landscape. Pathways in Geography Series, Title No. 8.

    ERIC Educational Resources Information Center

    Baumann, Paul R., Ed.

    This teaching guide offers educators glimpses into the value of remote sensing, the process of observing and analyzing the earth from a distance. Remote sensing provides information in forms to see spatial patterns over large areas in a more realistic way than thematic maps and allows a macro-scale look at global problems. The six instructional…

  3. Practical lessons in remote connectivity.

    PubMed Central

    Kouroubali, A.; Starren, J.; Barrows, R. C.; Clayton, P. D.

    1997-01-01

    Community Health Information Networks (CHINs) require the ability to provide computer network connections to many remote sites. During the implementation of the Washington Heights and Inwood Community Health Management Information System (WHICHIS) at the Columbia-Presbyterian Medical Center (CPMC), a number of remote connectivity issues have been encountered. Both technical and non-technical issues were significant during the installation. We developed a work-flow model for this process which may be helpful to any health care institution attempting to provide seamless remote connectivity. This model is presented and implementation lessons are discussed. PMID:9357643

  4. The Large Area Crop Inventory Experiment (LACIE). Part 3: A systematic approach to the practical application of remote-sensing technology

    NASA Technical Reports Server (NTRS)

    Murphy, J. D.; Dideriksen, R. I.

    1975-01-01

    The application of remote sensing technology by the U.S. Department of Agriculture (USDA) is examined. The activities of the USDA Remote-Sensing User Requirement Task Force which include cataloging USDA requirements for earth resources data, determining those requirements that would return maximum benefits by using remote sensing technology and developing a plan for acquiring, processing, analyzing, and distributing data to satisfy those requirements are described. Emphasis is placed on the large area crop inventory experiment and its relationship to the task force.

  5. Measurement of Hydrologic Resource Parameters Through Remote Sensing in the Feather River Headwaters Area

    NASA Technical Reports Server (NTRS)

    Thorley, G. A.; Draeger, W. C.; Lauer, D. T.; Lent, J.; Roberts, E.

    1971-01-01

    The four problem are as being investigated are: (1) determination of the feasibility of providing the resource manager with operationally useful information through the use of remote sensing techniques; (2) definition of the spectral characteristics of earth resources and the optimum procedures for calibrating tone and color characteristics of multispectral imagery (3) determination of the extent to which humans can extract useful earth resource information through remote sensing imagery; (4) determination of the extent to which automatic classification and data processing can extract useful information from remote sensing data.

  6. Probabilistic Broadcast-Based Multiparty Remote State Preparation scheme via Four-Qubit Cluster State

    NASA Astrophysics Data System (ADS)

    Zhou, Yun-Jing; Tao, Yuan-Hong

    2018-02-01

    In this letter,we propose a broadcast-based multiparty remote state preparation scheme which realizes the process among three participants. It allows two distant receivers to obtain the arbitrary single-qubit states separately and simultaneously, and the success probability is {d2}/{1+d2}, thus generalize the results in Yu et al. (Quantum. Inf. Process 16(2), 41, 2017).

  7. The Usual and the Unusual: Solving Remote Associates Test Tasks Using Simple Statistical Natural Language Processing Based on Language Use

    ERIC Educational Resources Information Center

    Klein, Ariel; Badia, Toni

    2015-01-01

    In this study we show how complex creative relations can arise from fairly frequent semantic relations observed in everyday language. By doing this, we reflect on some key cognitive aspects of linguistic and general creativity. In our experimentation, we automated the process of solving a battery of Remote Associates Test tasks. By applying…

  8. Remote-controlled optics experiment for supporting senior high school and undergraduate teaching

    NASA Astrophysics Data System (ADS)

    Choy, S. H.; Jim, K. L.; Mak, C. L.; Leung, C. W.

    2017-08-01

    This paper reports the development of a remote laboratory (RemoteLab) platform for practising technologyenhanced learning of optics. The development of RemoteLab enhances students' understanding of experimental methodologies and outcomes, and enable students to conduct experiments everywhere at all times. While the initial goal of the system was for physics major undergradutes, the sytem was also made available for senior secondary school students. To gauge the impact of the RemoteLab, we evaluated two groups of students, which included 109 physics 1st-year undergraduates and 11 students from a local secondary school. After the experiments, evaluation including questionnaire survey and interviews were conducted to collect data on students' perceptions on RemoteLab and implementation issues related to the platform. The surveys focused on four main topics, including user interface, experiment setup, booking system and learning process. The survey results indicated that most of the participants' views towards RemoteLab was positive.

  9. Online catalog access and distribution of remotely sensed information

    NASA Astrophysics Data System (ADS)

    Lutton, Stephen M.

    1997-09-01

    Remote sensing is providing voluminous data and value added information products. Electronic sensors, communication electronics, computer software, hardware, and network communications technology have matured to the point where a distributed infrastructure for remotely sensed information is a reality. The amount of remotely sensed data and information is making distributed infrastructure almost a necessity. This infrastructure provides data collection, archiving, cataloging, browsing, processing, and viewing for applications from scientific research to economic, legal, and national security decision making. The remote sensing field is entering a new exciting stage of commercial growth and expansion into the mainstream of government and business decision making. This paper overviews this new distributed infrastructure and then focuses on describing a software system for on-line catalog access and distribution of remotely sensed information.

  10. Progress in remote sensing of global land surface heat fluxes and evaporations with a turbulent heat exchange parameterization method

    NASA Astrophysics Data System (ADS)

    Chen, Xuelong; Su, Bob

    2017-04-01

    Remote sensing has provided us an opportunity to observe Earth land surface with a much higher resolution than any of GCM simulation. Due to scarcity of information for land surface physical parameters, up-to-date GCMs still have large uncertainties in the coupled land surface process modeling. One critical issue is a large amount of parameters used in their land surface models. Thus remote sensing of land surface spectral information can be used to provide information on these parameters or assimilated to decrease the model uncertainties. Satellite imager could observe the Earth land surface with optical, thermal and microwave bands. Some basic Earth land surface status (land surface temperature, canopy height, canopy leaf area index, soil moisture etc.) has been produced with remote sensing technique, which already help scientists understanding Earth land and atmosphere interaction more precisely. However, there are some challenges when applying remote sensing variables to calculate global land-air heat and water exchange fluxes. Firstly, a global turbulent exchange parameterization scheme needs to be developed and verified, especially for global momentum and heat roughness length calculation with remote sensing information. Secondly, a compromise needs to be innovated to overcome the spatial-temporal gaps in remote sensing variables to make the remote sensing based land surface fluxes applicable for GCM model verification or comparison. A flux network data library (more 200 flux towers) was collected to verify the designed method. Important progress in remote sensing of global land flux and evaporation will be presented and its benefits for GCM models will also be discussed. Some in-situ studies on the Tibetan Plateau and problems of land surface process simulation will also be discussed.

  11. Brain structural, functional, and cognitive correlates of recent versus remote autobiographical memories in amnestic Mild Cognitive Impairment

    PubMed Central

    Tomadesso, Clémence; Perrotin, Audrey; Mutlu, Justine; Mézenge, Florence; Landeau, Brigitte; Egret, Stéphanie; de la Sayette, Vincent; Jonin, Pierre-Yves; Eustache, Francis; Desgranges, Béatrice; Chételat, Gaël

    2015-01-01

    Deficits in autobiographical memory appear earlier for recent than for remote life periods over the course of Alzheimer's disease (AD). The present study aims to further our understanding of this graded effect by investigating the cognitive and neural substrates of recent versus remote autobiographical memories in patients with amnestic Mild Cognitive Impairment (aMCI) thanks to an autobiographical fluency task. 20 aMCI patients and 25 Healthy elderly Controls (HC) underwent neuropsychological tests assessing remote (20-to-30 years old) and recent (the ten last years) autobiographical memory as well as episodic and semantic memory, executive function and global cognition. All patients also had a structural MRI and an FDG-PET scan. Correlations were assessed between each autobiographical memory score and the other tests as well as grey matter volume and metabolism. Within the aMCI, performances for the remote period correlated with personal semantic memory and episodic memory retrieval whereas performances for the recent period only correlated with episodic memory retrieval. Neuroimaging analyses revealed significant correlations between performances for the remote period and temporal pole and temporo-parietal cortex volumes and anterior cingulate gyrus metabolism, while performances for the recent period correlated with hippocampal volume and posterior cingulate, medial prefrontal and hippocampus metabolism. The brain regions related with the retrieval of events from the recent period showed greater atrophy/hypometabolism in aMCI patients compared to HC than those involved in remote memories. Recall of recent memories essentially relies on episodic memory processes and brain network while remote memories also involve other processes such as semantic memory. This is consistent with the semanticization of memories with time and may explain the better resistance of remote memory in AD. PMID:26106572

  12. Brain structural, functional, and cognitive correlates of recent versus remote autobiographical memories in amnestic Mild Cognitive Impairment.

    PubMed

    Tomadesso, Clémence; Perrotin, Audrey; Mutlu, Justine; Mézenge, Florence; Landeau, Brigitte; Egret, Stéphanie; de la Sayette, Vincent; Jonin, Pierre-Yves; Eustache, Francis; Desgranges, Béatrice; Chételat, Gaël

    2015-01-01

    Deficits in autobiographical memory appear earlier for recent than for remote life periods over the course of Alzheimer's disease (AD). The present study aims to further our understanding of this graded effect by investigating the cognitive and neural substrates of recent versus remote autobiographical memories in patients with amnestic Mild Cognitive Impairment (aMCI) thanks to an autobiographical fluency task. 20 aMCI patients and 25 Healthy elderly Controls (HC) underwent neuropsychological tests assessing remote (20-to-30 years old) and recent (the ten last years) autobiographical memory as well as episodic and semantic memory, executive function and global cognition. All patients also had a structural MRI and an FDG-PET scan. Correlations were assessed between each autobiographical memory score and the other tests as well as grey matter volume and metabolism. Within the aMCI, performances for the remote period correlated with personal semantic memory and episodic memory retrieval whereas performances for the recent period only correlated with episodic memory retrieval. Neuroimaging analyses revealed significant correlations between performances for the remote period and temporal pole and temporo-parietal cortex volumes and anterior cingulate gyrus metabolism, while performances for the recent period correlated with hippocampal volume and posterior cingulate, medial prefrontal and hippocampus metabolism. The brain regions related with the retrieval of events from the recent period showed greater atrophy/hypometabolism in aMCI patients compared to HC than those involved in remote memories. Recall of recent memories essentially relies on episodic memory processes and brain network while remote memories also involve other processes such as semantic memory. This is consistent with the semanticization of memories with time and may explain the better resistance of remote memory in AD.

  13. HPT: A High Spatial Resolution Multispectral Sensor for Microsatellite Remote Sensing

    PubMed Central

    Takahashi, Yukihiro; Sakamoto, Yuji; Kuwahara, Toshinori

    2018-01-01

    Although nano/microsatellites have great potential as remote sensing platforms, the spatial and spectral resolutions of an optical payload instrument are limited. In this study, a high spatial resolution multispectral sensor, the High-Precision Telescope (HPT), was developed for the RISING-2 microsatellite. The HPT has four image sensors: three in the visible region of the spectrum used for the composition of true color images, and a fourth in the near-infrared region, which employs liquid crystal tunable filter (LCTF) technology for wavelength scanning. Band-to-band image registration methods have also been developed for the HPT and implemented in the image processing procedure. The processed images were compared with other satellite images, and proven to be useful in various remote sensing applications. Thus, LCTF technology can be considered an innovative tool that is suitable for future multi/hyperspectral remote sensing by nano/microsatellites. PMID:29463022

  14. Distributed solar photovoltaic array location and extent dataset for remote sensing object identification

    PubMed Central

    Bradbury, Kyle; Saboo, Raghav; L. Johnson, Timothy; Malof, Jordan M.; Devarajan, Arjun; Zhang, Wuming; M. Collins, Leslie; G. Newell, Richard

    2016-01-01

    Earth-observing remote sensing data, including aerial photography and satellite imagery, offer a snapshot of the world from which we can learn about the state of natural resources and the built environment. The components of energy systems that are visible from above can be automatically assessed with these remote sensing data when processed with machine learning methods. Here, we focus on the information gap in distributed solar photovoltaic (PV) arrays, of which there is limited public data on solar PV deployments at small geographic scales. We created a dataset of solar PV arrays to initiate and develop the process of automatically identifying solar PV locations using remote sensing imagery. This dataset contains the geospatial coordinates and border vertices for over 19,000 solar panels across 601 high-resolution images from four cities in California. Dataset applications include training object detection and other machine learning algorithms that use remote sensing imagery, developing specific algorithms for predictive detection of distributed PV systems, estimating installed PV capacity, and analysis of the socioeconomic correlates of PV deployment. PMID:27922592

  15. Unmanned aerial systems for photogrammetry and remote sensing: A review

    NASA Astrophysics Data System (ADS)

    Colomina, I.; Molina, P.

    2014-06-01

    We discuss the evolution and state-of-the-art of the use of Unmanned Aerial Systems (UAS) in the field of Photogrammetry and Remote Sensing (PaRS). UAS, Remotely-Piloted Aerial Systems, Unmanned Aerial Vehicles or simply, drones are a hot topic comprising a diverse array of aspects including technology, privacy rights, safety and regulations, and even war and peace. Modern photogrammetry and remote sensing identified the potential of UAS-sourced imagery more than thirty years ago. In the last five years, these two sister disciplines have developed technology and methods that challenge the current aeronautical regulatory framework and their own traditional acquisition and processing methods. Navety and ingenuity have combined off-the-shelf, low-cost equipment with sophisticated computer vision, robotics and geomatic engineering. The results are cm-level resolution and accuracy products that can be generated even with cameras costing a few-hundred euros. In this review article, following a brief historic background and regulatory status analysis, we review the recent unmanned aircraft, sensing, navigation, orientation and general data processing developments for UAS photogrammetry and remote sensing with emphasis on the nano-micro-mini UAS segment.

  16. Distributed solar photovoltaic array location and extent dataset for remote sensing object identification

    NASA Astrophysics Data System (ADS)

    Bradbury, Kyle; Saboo, Raghav; L. Johnson, Timothy; Malof, Jordan M.; Devarajan, Arjun; Zhang, Wuming; M. Collins, Leslie; G. Newell, Richard

    2016-12-01

    Earth-observing remote sensing data, including aerial photography and satellite imagery, offer a snapshot of the world from which we can learn about the state of natural resources and the built environment. The components of energy systems that are visible from above can be automatically assessed with these remote sensing data when processed with machine learning methods. Here, we focus on the information gap in distributed solar photovoltaic (PV) arrays, of which there is limited public data on solar PV deployments at small geographic scales. We created a dataset of solar PV arrays to initiate and develop the process of automatically identifying solar PV locations using remote sensing imagery. This dataset contains the geospatial coordinates and border vertices for over 19,000 solar panels across 601 high-resolution images from four cities in California. Dataset applications include training object detection and other machine learning algorithms that use remote sensing imagery, developing specific algorithms for predictive detection of distributed PV systems, estimating installed PV capacity, and analysis of the socioeconomic correlates of PV deployment.

  17. Distributed solar photovoltaic array location and extent dataset for remote sensing object identification.

    PubMed

    Bradbury, Kyle; Saboo, Raghav; L Johnson, Timothy; Malof, Jordan M; Devarajan, Arjun; Zhang, Wuming; M Collins, Leslie; G Newell, Richard

    2016-12-06

    Earth-observing remote sensing data, including aerial photography and satellite imagery, offer a snapshot of the world from which we can learn about the state of natural resources and the built environment. The components of energy systems that are visible from above can be automatically assessed with these remote sensing data when processed with machine learning methods. Here, we focus on the information gap in distributed solar photovoltaic (PV) arrays, of which there is limited public data on solar PV deployments at small geographic scales. We created a dataset of solar PV arrays to initiate and develop the process of automatically identifying solar PV locations using remote sensing imagery. This dataset contains the geospatial coordinates and border vertices for over 19,000 solar panels across 601 high-resolution images from four cities in California. Dataset applications include training object detection and other machine learning algorithms that use remote sensing imagery, developing specific algorithms for predictive detection of distributed PV systems, estimating installed PV capacity, and analysis of the socioeconomic correlates of PV deployment.

  18. Remote Sensing in Geography in the New Millennium: Prospects, Challenges and Opportunities

    NASA Technical Reports Server (NTRS)

    Quattrochi, Dale A.; Walsh, Stephen J.; Jensen, John R.; Ridd, Merrill K.; Arnold, James E. (Technical Monitor)

    2002-01-01

    As noted in the first edition of Geography in America, the term remote sensing was coined in the early 1960's by geographers to describe the process of obtaining data by use of both photographic and nonphotographic instruments. Although this is still a working definition today, a more explicit and updated definition as it relates to geography can be phrased as: "remote sensing is the science, art, and technology of identifying, characterizing, measuring, and mapping of Earth surface, and near earth surface, phenomena from some position above using photographic or nonphotographic instruments." Both patterns and processes may be the object of investigation using remote sensing data. The science dimension of geographic remote sensing is rooted in the fact that: a) it is dealing with primary data, wherein the investigator must have an understanding of the environmental phenomena under scrutiny, and b) the investigator must understand something of the physics of the energy involved in the sensing instrument and the atmospheric pathway through which the energy passes from the energy source, to the Earth object to the sensor.

  19. Tracking diurnal changes of photosynthesis and evapotranspiration using fluorescence, gas exchange and hyperspectral remote sensing measurements

    NASA Astrophysics Data System (ADS)

    Wang, S.; Zhang, L.; Guanter, L.; Huang, C.

    2017-12-01

    Photosynthesis and evapotranspiration (ET) are the two most important activities of vegetation and make a great contribution to carbon, water and energy exchanges. Remote sensing provides opportunities for monitoring these processes across time and space. This study focuses on tracking diurnal changes of photosynthesis and evapotranspiration over soybean using multiple measurement techniques. Diurnal changes of both remote sensing-based indicators, including active and passive chlorophyll fluorescence and biophysical-related parameters, including photosynthesis rate (photo) and leaf stomatal conductance (cond), were observed. Results showed that both leaf-level steady-state fluorescence (Fs) and canopy-level solar-induced chlorophyll fluorescence were linearly correlated to photosynthetically active radiation (PAR) during the daytime. A double-peak diurnal change curve was observed for leaf-level photo and cond but not for Fs or SIF. Photo and cond showed a strong nonlinear (second-order) correlation, indicating that photosynthesis, which might be remotely sensed by SIF, has the opportunity to track short-term changes of ET. Results presented in this report will be helpful for better understanding the relationship between remote-sensing-based indices and vegetation's biophysical processes.

  20. Integrated solution for the complete remote sensing process - Earth Observation Mission Control Centre (EOMC2)

    NASA Astrophysics Data System (ADS)

    Czapski, Paweł

    2016-07-01

    We are going to show the latest achievements of the Remote Sensing Division of the Institute of Aviation in the area of remote sensing, i.e. the project of the integrated solution for the whole remote sensing process ranging from acquiring to providing the end user with required information. Currently, these tasks are partially performed by several centers in Poland, however there is no leader providing an integrated solution. Motivated by this fact, the Earth Observation Mission Control Centre (EOMC2) was established in the Remote Sensing Division of the Institute of Aviation that will provide such a comprehensive approach. Establishing of EOMC2 can be compared with creating Data Center Aerial and Satellite Data Centre (OPOLIS) in the Institute of Geodesy and Cartography in the mid-70s in Poland. OPOLIS was responsible for broadly defined data processing, it was a breakthrough innovation that initiated the use of aerial image analysis in Poland. Operation center is a part of the project that will be created, which in comparison with the competitors will provide better solutions, i.e.: • Centralization of the acquiring, processing, publishing and archiving of data, • Implementing elements of the INSPIRE directive recommendations on spatial data management, • Providing the end-user with information in the near real-time, • Ability of supplying the system with images of various origin (aerial, satellite, e.g. EUMETCast, Sentinel, Landsat) and diversity of telemetry data, data aggregation and using the same algorithms to images obtained from different sources, • System reconfiguration and batch processing of large data sets at any time, • A wide range of potential applications: precision agriculture, environmental protection, crisis management and national security, aerial, small satellite and sounding rocket missions monitoring.

  1. Remote sensing of the marginal ice zone during Marginal Ice Zone Experiment (MIZEX) 83

    NASA Technical Reports Server (NTRS)

    Shuchman, R. A.; Campbell, W. J.; Burns, B. A.; Ellingsen, E.; Farrelly, B. A.; Gloersen, P.; Grenfell, T. C.; Hollinger, J.; Horn, D.; Johannessen, J. A.

    1984-01-01

    The remote sensing techniques utilized in the Marginal Ice Zone Experiment (MIZEX) to study the physical characteristics and geophysical processes of the Fram Strait Region of the Greenland Sea are described. The studies, which utilized satellites, aircraft, helicopters, and ship and ground-based remote sensors, focused on the use of microwave remote sensors. Results indicate that remote sensors can provide marginal ice zone characteristics which include ice edge and ice boundary locations, ice types and concentration, ice deformation, ice kinematics, gravity waves and swell (in the water and the ice), location of internal wave fields, location of eddies and current boundaries, surface currents and sea surface winds.

  2. Super-low friction and super-elastic hydrogenated carbon films originated from a unique fullerene-like nanostructure

    NASA Astrophysics Data System (ADS)

    Wang, Chengbing; Yang, Shengrong; Wang, Qi; Wang, Zhou; Zhang, Junyan

    2008-06-01

    Hydrogenated carbon films were grown by a plasma-enhanced chemical vapor deposition (PECVD) technique using CH4 and H2 as feedstock at ambient temperature. The microstructure of the films was characterized by high resolution transmission electron microscopy (HRTEM). The images showed the presence of curved basal planes in fullerene-like arrangements. An apparent amorphous graphene structure with nm-sized packages of basal planes in a turbostratic feature was observed. The fabricated fullerene-like hydrogenated carbon films (FL-C:H) possess superior mechanical properties, i.e. high hardness (19 GPa) and high elasticity (elastic recovery of 85%). More importantly, the films exhibit ultra-low friction (μ = 0.009) under ambient conditions with 20% relative humidity.

  3. Super-low friction and super-elastic hydrogenated carbon films originated from a unique fullerene-like nanostructure.

    PubMed

    Wang, Chengbing; Yang, Shengrong; Wang, Qi; Wang, Zhou; Zhang, Junyan

    2008-06-04

    Hydrogenated carbon films were grown by a plasma-enhanced chemical vapor deposition (PECVD) technique using CH(4) and H(2) as feedstock at ambient temperature. The microstructure of the films was characterized by high resolution transmission electron microscopy (HRTEM). The images showed the presence of curved basal planes in fullerene-like arrangements. An apparent amorphous graphene structure with nm-sized packages of basal planes in a turbostratic feature was observed. The fabricated fullerene-like hydrogenated carbon films (FL-C:H) possess superior mechanical properties, i.e. high hardness (19 GPa) and high elasticity (elastic recovery of 85%). More importantly, the films exhibit ultra-low friction (μ = 0.009) under ambient conditions with 20% relative humidity.

  4. Microfabrication of low-loss lumped-element Josephson circuits for non-reciprocal and parametric devices

    NASA Astrophysics Data System (ADS)

    Cicak, Katarina; Lecocq, Florent; Ranzani, Leonardo; Peterson, Gabriel A.; Kotler, Shlomi; Teufel, John D.; Simmonds, Raymond W.; Aumentado, Jose

    Recent developments in coupled mode theory have opened the doors to new nonreciprocal amplification techniques that can be directly leveraged to produce high quantum efficiency in current measurements in microwave quantum information. However, taking advantage of these techniques requires flexible multi-mode circuit designs comprised of low-loss materials that can be implemented using common fabrication techniques. In this talk we discuss the design and fabrication of a new class of multi-pole lumped-element superconducting parametric amplifiers based on Nb/Al-AlOx/Nb Josephson junctions on silicon or sapphire. To reduce intrinsic loss in these circuits we utilize PECVD amorphous silicon as a low-loss dielectric (tanδ 5 ×10-4), resulting in nearly quantum-limited directional amplification.

  5. LACO-Wiki: A land cover validation tool and a new, innovative teaching resource for remote sensing and the geosciences

    NASA Astrophysics Data System (ADS)

    See, Linda; Perger, Christoph; Dresel, Christopher; Hofer, Martin; Weichselbaum, Juergen; Mondel, Thomas; Steffen, Fritz

    2016-04-01

    The validation of land cover products is an important step in the workflow of generating a land cover map from remotely-sensed imagery. Many students of remote sensing will be given exercises on classifying a land cover map followed by the validation process. Many algorithms exist for classification, embedded within proprietary image processing software or increasingly as open source tools. However, there is little standardization for land cover validation, nor a set of open tools available for implementing this process. The LACO-Wiki tool was developed as a way of filling this gap, bringing together standardized land cover validation methods and workflows into a single portal. This includes the storage and management of land cover maps and validation data; step-by-step instructions to guide users through the validation process; sound sampling designs; an easy-to-use environment for validation sample interpretation; and the generation of accuracy reports based on the validation process. The tool was developed for a range of users including producers of land cover maps, researchers, teachers and students. The use of such a tool could be embedded within the curriculum of remote sensing courses at a university level but is simple enough for use by students aged 13-18. A beta version of the tool is available for testing at: http://www.laco-wiki.net.

  6. A simulation of remote sensor systems and data processing algorithms for spectral feature classification

    NASA Technical Reports Server (NTRS)

    Arduini, R. F.; Aherron, R. M.; Samms, R. W.

    1984-01-01

    A computational model of the deterministic and stochastic processes involved in multispectral remote sensing was designed to evaluate the performance of sensor systems and data processing algorithms for spectral feature classification. Accuracy in distinguishing between categories of surfaces or between specific types is developed as a means to compare sensor systems and data processing algorithms. The model allows studies to be made of the effects of variability of the atmosphere and of surface reflectance, as well as the effects of channel selection and sensor noise. Examples of these effects are shown.

  7. IMAGES: An interactive image processing system

    NASA Technical Reports Server (NTRS)

    Jensen, J. R.

    1981-01-01

    The IMAGES interactive image processing system was created specifically for undergraduate remote sensing education in geography. The system is interactive, relatively inexpensive to operate, almost hardware independent, and responsive to numerous users at one time in a time-sharing mode. Most important, it provides a medium whereby theoretical remote sensing principles discussed in lecture may be reinforced in laboratory as students perform computer-assisted image processing. In addition to its use in academic and short course environments, the system has also been used extensively to conduct basic image processing research. The flow of information through the system is discussed including an overview of the programs.

  8. Using multi-level remote sensing and ground data to estimate forest biomass resources in remote regions: a case study in the boreal forests of interior Alaska

    Treesearch

    Hans-Erik Andersen; Strunk Jacob; Hailemariam Temesgen; Donald Atwood; Ken Winterberger

    2012-01-01

    The emergence of a new generation of remote sensing and geopositioning technologies, as well as increased capabilities in image processing, computing, and inferential techniques, have enabled the development and implementation of increasingly efficient and cost-effective multilevel sampling designs for forest inventory. In this paper, we (i) describe the conceptual...

  9. Progress in the Development of Practical Remote Detection of Icing Conditions

    NASA Technical Reports Server (NTRS)

    Reehorst, Andrew; Politovich, Marcia K.; Zednik, Stephan; Isaac, George A.; Cober, Stewart

    2006-01-01

    The NASA Icing Remote Sensing System (NIRSS) has been under definition and development at NASA Glenn Research Center since 1997. The goal of this development activity is to produce and demonstrate the required sensing and data processing technologies required to accurately remotely detect and measure icing conditions aloft. As part of that effort NASA has teamed with NCAR to develop software to fuse data from multiple instruments into a single detected icing condition product. The multiple instrument approach utilizes a X-band vertical staring radar, a multifrequency microwave, and a lidar ceilometer. The radar data determine cloud boundaries, the radiometer determines the sub-freezing temperature heights and total liquid water content, and the ceilometer refines the lower cloud boundary. Data is post-processed with a LabVIEW program with a resultant supercooled liquid water profile and aircraft hazard depiction. Ground-based, remotely-sensed measurements and in-situ measurements from research aircraft were gathered during the international 2003-2004 Alliance Icing Research Study (AIRS II). Comparisons between the remote sensing system s fused icing product and the aircraft measurements are reviewed here. While there are areas where improvement can be made, the cases examined suggest that the fused sensor remote sensing technique appears to be a valid approach.

  10. CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP627). INL PHOTO ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP-627). INL PHOTO NUMBER NRTS-54-12124. Unknown Photographer, 9/21/1954 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  11. DETAILS OF REMOTE ANALYTICAL FACILITY (CPP627). INL DRAWING NUMBER 200062700098105071. ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    DETAILS OF REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-0627-00-098-105071. ALTERNATE ID NUMBER 4272-14-108. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  12. Improved amorphous/crystalline silicon interface passivation for heterojunction solar cells by low-temperature chemical vapor deposition and post-annealing treatment.

    PubMed

    Wang, Fengyou; Zhang, Xiaodan; Wang, Liguo; Jiang, Yuanjian; Wei, Changchun; Xu, Shengzhi; Zhao, Ying

    2014-10-07

    In this study, hydrogenated amorphous silicon (a-Si:H) thin films are deposited using a radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) system. The Si-H configuration of the a-Si:H/c-Si interface is regulated by optimizing the deposition temperature and post-annealing duration to improve the minority carrier lifetime (τeff) of a commercial Czochralski (Cz) silicon wafer. The mechanism of this improvement involves saturation of the microstructural defects with hydrogen evolved within the a-Si:H films due to the transformation from SiH2 into SiH during the annealing process. The post-annealing temperature is controlled to ∼180 °C so that silicon heterojunction solar cells (SHJ) could be prepared without an additional annealing step. To achieve better performance of the SHJ solar cells, we also optimize the thickness of the a-Si:H passivation layer. Finally, complete SHJ solar cells are fabricated using different temperatures for the a-Si:H film deposition to study the influence of the deposition temperature on the solar cell parameters. For the optimized a-Si:H deposition conditions, an efficiency of 18.41% is achieved on a textured Cz silicon wafer.

  13. Liquid crystal displays with plastic substrates

    NASA Astrophysics Data System (ADS)

    Lueder, Ernst H.

    1998-04-01

    Plastic substrates for the cells of displays exhibit only 1/6 of the weight of glass substrates; they are virtually unbreakable; their flexibility allows the designer to give them a shape suppressing reflections, to realize a display board on a curved surface or meeting the requirements for an appealing styling; displays with plastics are thinner which provides a wider viewing angle. These features render them attractive for displays in portable systems such as mobile phones, pagers, smart cards, personal digital assistants (PDAs) and portable computers. Reflective displays are especially attractive as they don't need a back light. The most important requirements are the protection of plastics against gas permeation and chemical agents, the prevention of layers on plastics to crack or peel off when the plastic is bent and the development of low temperature thin film processes because the plastics, as a rule, only tolerate temperatures below 150 degrees Celsius. Bistable reflective FLC- and PSCT-displays with plastic substrates will be introduced. Special sputtered SiO2-orientation layers preserve the displayed information even if pressure or torsion is applied. MIM-addressed PDLC-displays require additional Al- or Ti-layers which provide the necessary ductility. Sputtered or PECVD-generated TFTs can be fabricated on plastics at temperatures below 150 degrees Celsius.

  14. Robustness up to 400°C of the passivation of c-Si by p-type a-Si:H thanks to ion implantation

    NASA Astrophysics Data System (ADS)

    Defresne, A.; Plantevin, O.; Roca i Cabarrocas, Pere

    2016-12-01

    Heterojunction solar cells based on crystalline silicon (c-Si) passivated by hydrogenated amorphous silicon (a-Si:H) thin films are one of the most promising architectures for high energy conversion efficiency. Indeed, a-Si:H thin films can passivate both p-type and n-type wafers and can be deposited at low temperature (<200°C) using PECVD. However, such passivation layers, in particular p-type a-Si:H, show a dramatic degradation in passivation quality above 200°C. Yet, annealing at 300 - 400°C the TCO layer and metallic contacts is highly desirable to reduce the contact resistance as well as the TCO optical absorption. In this work, we show that as expected, ion implantation (5 - 30 keV) introduces defects at the c-Si/a-Si:H interface which strongly degrade the effective lifetime, down to a few micro-seconds. However, the passivation quality can be restored and lifetime values can be improved up to 2 ms over the initial value with annealing. We show here that effective lifetimes above 1 ms can be maintained up to 380°C, opening up the possibility for higher process temperatures in silicon heterojunction device fabrication.

  15. Defect prevention in silica thin films synthesized using AP-PECVD for flexible electronic encapsulation

    NASA Astrophysics Data System (ADS)

    Elam, Fiona M.; Starostin, Sergey A.; Meshkova, Anna S.; van der Velden-Schuermans, Bernadette C. A. M.; van de Sanden, Mauritius C. M.; de Vries, Hindrik W.

    2017-06-01

    Industrially and commercially relevant roll-to-roll atmospheric pressure-plasma enhanced chemical vapour deposition was used to synthesize smooth, 80 nm silica-like bilayer thin films comprising a dense ‘barrier layer’ and comparatively porous ‘buffer layer’ onto a flexible polyethylene 2,6 naphthalate substrate. For both layers, tetraethyl orthosilicate was used as the precursor gas, together with a mixture of nitrogen, oxygen and argon. The bilayer films demonstrated exceptionally low effective water vapour transmission rates in the region of 6.1  ×  10-4 g m-2 d-1 (at 40 °C, 90% relative humidity), thus capable of protecting flexible photovoltaics and thin film transistors from degradation caused by oxygen and water. The presence of the buffer layer within the bilayer architecture was mandatory in order to achieve the excellent encapsulation performance. Atomic force microscopy in addition to solvent permeation measurements, confirmed that the buffer layer prevented the formation of performance-limiting defects in the bilayer thin films, which likely occur as a result of excessive plasma-surface interactions during the deposition process. It emerged that the primary function of the buffer layer was therefore to act as a protective coating for the flexible polymer substrate material.

  16. EXPERIMENTS IN LITHOGRAPHY FROM REMOTE SENSOR IMAGERY.

    USGS Publications Warehouse

    Kidwell, R. H.; McSweeney, J.; Warren, A.; Zang, E.; Vickers, E.

    1983-01-01

    Imagery from remote sensing systems such as the Landsat multispectral scanner and return beam vidicon, as well as synthetic aperture radar and conventional optical camera systems, contains information at resolutions far in excess of that which can be reproduced by the lithographic printing process. The data often require special handling to produce both standard and special map products. Some conclusions have been drawn regarding processing techniques, procedures for production, and printing limitations.

  17. Understanding Local Structure Globally in Earth Science Remote Sensing Data Sets

    NASA Technical Reports Server (NTRS)

    Braverman, Amy; Fetzer, Eric

    2007-01-01

    Empirical probability distributions derived from the data are the signatures of physical processes generating the data. Distributions defined on different space-time windows can be compared and differences or changes can be attributed to physical processes. This presentation discusses on ways to reduce remote sensing data in a way that preserves information, focusing on the rate-distortion theory and using the entropy-constrained vector quantization algorithm.

  18. Ocean Remote Sensing Using Ambient Noise

    DTIC Science & Technology

    2015-09-30

    and other adaptive array processing methods. OBJECTIVES Work on this project has focused on noise interferometry – the process by which an...measured at xA and xB. In that context, our objective is to investigate and identify the limitations of noise interferometry for remote sensing...and 6 is ongoing. 1. Demonstration of noise interferometry at 10 km range in a shallow water environment Recently conducted experiments in the

  19. Science Data Preservation: Implementation and Why It Is Important

    NASA Technical Reports Server (NTRS)

    Kempler, Steven J.; Moses, John F.; Gerasimov, Irina V.; Johnson, James E.; Vollmer, Bruce E.; Theobald, Michael L.; Ostrenga, Dana M.; Ahmad, Suraiya; Ramapriyan, Hampapuram K.; Khayat, Mohammad G.

    2013-01-01

    Remote Sensing data generation by NASA to study Earth s geophysical processes was initiated in 1960 with the launch of the first Television Infrared Observation Satellite Program (TIROS), to develop a meteorological satellite information system. What would be deemed as a primitive data set by today s standards, early Earth science missions were the foundation upon which today s remote sensing instruments have built their scientific success, and tomorrow s instruments will yield science not yet imagined. NASA Scientific Data Stewardship requirements have been documented to ensure the long term preservation and usability of remote sensing science data. In recent years, the Federation of Earth Science Information Partners and NASA s Earth Science Data System Working Groups have organized committees that specifically examine standards, processes, and ontologies that can best be employed for the preservation of remote sensing data, supporting documentation, and data provenance information. This presentation describes the activities, issues, and implementations, guided by the NASA Earth Science Data Preservation Content Specification (423-SPEC-001), for preserving instrument characteristics, and data processing and science information generated for 20 Earth science instruments, spanning 40 years of geophysical measurements, at the NASA s Goddard Earth Sciences Data and Information Services Center (GES DISC). In addition, unanticipated preservation/implementation questions and issues in the implementation process are presented.

  20. Photogrammetric Processing of Planetary Linear Pushbroom Images Based on Approximate Orthophotos

    NASA Astrophysics Data System (ADS)

    Geng, X.; Xu, Q.; Xing, S.; Hou, Y. F.; Lan, C. Z.; Zhang, J. J.

    2018-04-01

    It is still a great challenging task to efficiently produce planetary mapping products from orbital remote sensing images. There are many disadvantages in photogrammetric processing of planetary stereo images, such as lacking ground control information and informative features. Among which, image matching is the most difficult job in planetary photogrammetry. This paper designs a photogrammetric processing framework for planetary remote sensing images based on approximate orthophotos. Both tie points extraction for bundle adjustment and dense image matching for generating digital terrain model (DTM) are performed on approximate orthophotos. Since most of planetary remote sensing images are acquired by linear scanner cameras, we mainly deal with linear pushbroom images. In order to improve the computational efficiency of orthophotos generation and coordinates transformation, a fast back-projection algorithm of linear pushbroom images is introduced. Moreover, an iteratively refined DTM and orthophotos scheme was adopted in the DTM generation process, which is helpful to reduce search space of image matching and improve matching accuracy of conjugate points. With the advantages of approximate orthophotos, the matching results of planetary remote sensing images can be greatly improved. We tested the proposed approach with Mars Express (MEX) High Resolution Stereo Camera (HRSC) and Lunar Reconnaissance Orbiter (LRO) Narrow Angle Camera (NAC) images. The preliminary experimental results demonstrate the feasibility of the proposed approach.

  1. Natural Resource Information System. Volume 1: Overall description

    NASA Technical Reports Server (NTRS)

    1972-01-01

    A prototype computer-based Natural Resource Information System was designed which could store, process, and display data of maximum usefulness to land management decision making. The system includes graphic input and display, the use of remote sensing as a data source, and it is useful at multiple management levels. A survey established current decision making processes and functions, information requirements, and data collection and processing procedures. The applications of remote sensing data and processing requirements were established. Processing software was constructed and a data base established using high-altitude imagery and map coverage of selected areas of SE Arizona. Finally a demonstration of system processing functions was conducted utilizing material from the data base.

  2. Faithful Remote Information Concentration Based on the Optimal Universal 1→2 Telecloning of Arbitrary Two-Qubit States

    NASA Astrophysics Data System (ADS)

    Peng, Jia-Yin; Lei, Hong-Xuan; Mo, Zhi-Wen

    2014-05-01

    The previous protocols of remote quantum information concentration were focused on the reverse process of quantum telecloning of single-qubit states. We here investigate the reverse process of optimal universal 1→2 telecloning of arbitrary two-qubit states. The aim of this telecloning is to distribute respectively the quantum information to two groups of spatially separated receivers from a group of two senders situated at two different locations. Our scheme shows that the distributed quantum information can be remotely concentrated back to a group of two different receivers with 1 of probability by utilizing maximally four-particle cluster state and four-particle GHZ state as quantum channel.

  3. Reliable and Fault-Tolerant Software-Defined Network Operations Scheme for Remote 3D Printing

    NASA Astrophysics Data System (ADS)

    Kim, Dongkyun; Gil, Joon-Min

    2015-03-01

    The recent wide expansion of applicable three-dimensional (3D) printing and software-defined networking (SDN) technologies has led to a great deal of attention being focused on efficient remote control of manufacturing processes. SDN is a renowned paradigm for network softwarization, which has helped facilitate remote manufacturing in association with high network performance, since SDN is designed to control network paths and traffic flows, guaranteeing improved quality of services by obtaining network requests from end-applications on demand through the separated SDN controller or control plane. However, current SDN approaches are generally focused on the controls and automation of the networks, which indicates that there is a lack of management plane development designed for a reliable and fault-tolerant SDN environment. Therefore, in addition to the inherent advantage of SDN, this paper proposes a new software-defined network operations center (SD-NOC) architecture to strengthen the reliability and fault-tolerance of SDN in terms of network operations and management in particular. The cooperation and orchestration between SDN and SD-NOC are also introduced for the SDN failover processes based on four principal SDN breakdown scenarios derived from the failures of the controller, SDN nodes, and connected links. The abovementioned SDN troubles significantly reduce the network reachability to remote devices (e.g., 3D printers, super high-definition cameras, etc.) and the reliability of relevant control processes. Our performance consideration and analysis results show that the proposed scheme can shrink operations and management overheads of SDN, which leads to the enhancement of responsiveness and reliability of SDN for remote 3D printing and control processes.

  4. Overall design of imaging spectrometer on-board light aircraft

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Zhongqi, H.; Zhengkui, C.; Changhua, C.

    1996-11-01

    Aerial remote sensing is the earliest remote sensing technical system and has gotten rapid development in recent years. The development of aerial remote sensing was dominated by high to medium altitude platform in the past, and now it is characterized by the diversity platform including planes of high-medium-low flying altitude, helicopter, airship, remotely controlled airplane, glider, and balloon. The widely used and rapidly developed platform recently is light aircraft. Early in the close of 1970s, Beijing Research Institute of Uranium Geology began aerial photography and geophysical survey using light aircraft, and put forward the overall design scheme of light aircraftmore » imaging spectral application system (LAISAS) in 19905. LAISAS is comprised of four subsystem. They are called measuring platform, data acquiring subsystem, ground testing and data processing subsystem respectively. The principal instruments of LAISAS include measuring platform controlled by inertia gyroscope, aerial spectrometer with high spectral resolution, imaging spectrometer, 3-channel scanner, 128-channel imaging spectrometer, GPS, illuminance-meter, and devices for atmospheric parameters measuring, ground testing, data correction and processing. LAISAS has the features of integrity from data acquisition to data processing and to application; of stability which guarantees the image quality and is comprised of measuring, ground testing device, and in-door data correction system; of exemplariness of integrated the technology of GIS, GPS, and Image Processing System; of practicality which embodied LAISAS with flexibility and high ratio of performance to cost. So, it can be used in the fields of fundamental research of Remote Sensing and large-scale mapping for resource exploration, environmental monitoring, calamity prediction, and military purpose.« less

  5. Based Real Time Remote Health Monitoring Systems: A Review on Patients Prioritization and Related "Big Data" Using Body Sensors information and Communication Technology.

    PubMed

    Kalid, Naser; Zaidan, A A; Zaidan, B B; Salman, Omar H; Hashim, M; Muzammil, H

    2017-12-29

    The growing worldwide population has increased the need for technologies, computerised software algorithms and smart devices that can monitor and assist patients anytime and anywhere and thus enable them to lead independent lives. The real-time remote monitoring of patients is an important issue in telemedicine. In the provision of healthcare services, patient prioritisation poses a significant challenge because of the complex decision-making process it involves when patients are considered 'big data'. To our knowledge, no study has highlighted the link between 'big data' characteristics and real-time remote healthcare monitoring in the patient prioritisation process, as well as the inherent challenges involved. Thus, we present comprehensive insights into the elements of big data characteristics according to the six 'Vs': volume, velocity, variety, veracity, value and variability. Each of these elements is presented and connected to a related part in the study of the connection between patient prioritisation and real-time remote healthcare monitoring systems. Then, we determine the weak points and recommend solutions as potential future work. This study makes the following contributions. (1) The link between big data characteristics and real-time remote healthcare monitoring in the patient prioritisation process is described. (2) The open issues and challenges for big data used in the patient prioritisation process are emphasised. (3) As a recommended solution, decision making using multiple criteria, such as vital signs and chief complaints, is utilised to prioritise the big data of patients with chronic diseases on the basis of the most urgent cases.

  6. Mississippi Sound Remote Sensing Study

    NASA Technical Reports Server (NTRS)

    Atwell, B. H.

    1973-01-01

    The Mississippi Sound Remote Sensing Study was initiated as part of the research program of the NASA Earth Resources Laboratory. The objective of this study is development of remote sensing techniques to study near-shore marine waters. Included within this general objective are the following: (1) evaluate existing techniques and instruments used for remote measurement of parameters of interest within these waters; (2) develop methods for interpretation of state-of-the-art remote sensing data which are most meaningful to an understanding of processes taking place within near-shore waters; (3) define hardware development requirements and/or system specifications; (4) develop a system combining data from remote and surface measurements which will most efficiently assess conditions in near-shore waters; (5) conduct projects in coordination with appropriate operating agencies to demonstrate applicability of this research to environmental and economic problems.

  7. Effect of remote inductively coupled plasma (ICP) on the electron energy probability function of an in-tandem main ICP

    NASA Astrophysics Data System (ADS)

    Lee, Jaewon; Kim, Kyung-Hyun; Chung, Chin-Wook

    2017-02-01

    The remote plasma has been generally used as the auxiliary plasma source for indirect plasma processes such as cleaning or ashing. When tandem plasma sources that contain main and remote plasma sources are discharged, the main plasma is affected by the remote plasma and vice versa. Charged particles can move between two chambers due to the potential difference between the two plasmas. For this reason, the electron energy possibility function of the main plasma can be controlled by adjusting the remote plasma state. In our study, low energy electrons in the main plasma are effectively heated with varying remote plasma powers, and high energy electrons which overcome potential differences between two plasmas—are exchanged with no remarkable change in the plasma density and the effective electron temperature.

  8. Reconstruction of atmospheric pollutant concentrations from remote sensing data - An application of distributed parameter observer theory

    NASA Technical Reports Server (NTRS)

    Koda, M.; Seinfeld, J. H.

    1982-01-01

    The reconstruction of a concentration distribution from spatially averaged and noise-corrupted data is a central problem in processing atmospheric remote sensing data. Distributed parameter observer theory is used to develop reconstructibility conditions for distributed parameter systems having measurements typical of those in remote sensing. The relation of the reconstructibility condition to the stability of the distributed parameter observer is demonstrated. The theory is applied to a variety of remote sensing situations, and it is found that those in which concentrations are measured as a function of altitude satisfy the conditions of distributed state reconstructibility.

  9. The Simple Concurrent Online Processing System (SCOPS) - An open-source interface for remotely sensed data processing

    NASA Astrophysics Data System (ADS)

    Warren, M. A.; Goult, S.; Clewley, D.

    2018-06-01

    Advances in technology allow remotely sensed data to be acquired with increasingly higher spatial and spectral resolutions. These data may then be used to influence government decision making and solve a number of research and application driven questions. However, such large volumes of data can be difficult to handle on a single personal computer or on older machines with slower components. Often the software required to process data is varied and can be highly technical and too advanced for the novice user to fully understand. This paper describes an open-source tool, the Simple Concurrent Online Processing System (SCOPS), which forms part of an airborne hyperspectral data processing chain that allows users accessing the tool over a web interface to submit jobs and process data remotely. It is demonstrated using Natural Environment Research Council Airborne Research Facility (NERC-ARF) instruments together with other free- and open-source tools to take radiometrically corrected data from sensor geometry into geocorrected form and to generate simple or complex band ratio products. The final processed data products are acquired via an HTTP download. SCOPS can cut data processing times and introduce complex processing software to novice users by distributing jobs across a network using a simple to use web interface.

  10. MISCELLANEOUS ARCHITECTURAL DETAILS OF REMOTE ANALYTICAL FACILITY (CPP627). INL DRAWING ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    MISCELLANEOUS ARCHITECTURAL DETAILS OF REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-0627-00-098-105631. ALTERNATE ID NUMBER 4272-814-134. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  11. CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP627). INL PHOTO ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP-627). INL PHOTO NUMBER NRTS-54-12573. R.G. Larsen, Photographer, 10/20/1954 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  12. CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP627) SHOWING INITIAL ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP-627) SHOWING INITIAL EXCAVATION. INL PHOTO NUMBER NRTS-54-10703. Unknown Photographer, 5/21/1954 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  13. Satellite remote sensing facility for oceanograhic applications

    NASA Technical Reports Server (NTRS)

    Evans, R. H.; Kent, S. S.; Seidman, J. B.

    1980-01-01

    The project organization, design process, and construction of a Remote Sensing Facility at Scripps Institution of Oceanography at LaJolla, California are described. The facility is capable of receiving, processing, and displaying oceanographic data received from satellites. Data are primarily imaging data representing the multispectral ocean emissions and reflectances, and are accumulated during 8 to 10 minute satellite passes over the California coast. The most important feature of the facility is the reception and processing of satellite data in real time, allowing investigators to direct ships to areas of interest for on-site verifications and experiments.

  14. On prediction and discovery of lunar ores

    NASA Technical Reports Server (NTRS)

    Haskin, Larry A.; Colson, Russell O.; Vaniman, David

    1991-01-01

    Sampling of lunar material and remote geochemical, mineralogical, and photogeologic sensing of the lunar surface, while meager, provide first-cut information about lunar composition and geochemical separation processes. Knowledge of elemental abundances in known lunar materials indicates which common lunar materials might serve as ores if there is economic demand and if economical extraction processes can be developed, remote sensing can be used to extend the understanding of the Moon's major geochemical separations and to locate potential ore bodies. Observed geochemical processes might lead to ores of less abundant elements under extreme local conditions.

  15. Image processing methods in two and three dimensions used to animate remotely sensed data. [cloud cover

    NASA Technical Reports Server (NTRS)

    Hussey, K. J.; Hall, J. R.; Mortensen, R. A.

    1986-01-01

    Image processing methods and software used to animate nonimaging remotely sensed data on cloud cover are described. Three FORTRAN programs were written in the VICAR2/TAE image processing domain to perform 3D perspective rendering, to interactively select parameters controlling the projection, and to interpolate parameter sets for animation images between key frames. Operation of the 3D programs and transferring the images to film is automated using executive control language and custom hardware to link the computer and camera.

  16. Model for mapping settlements

    DOEpatents

    Vatsavai, Ranga Raju; Graesser, Jordan B.; Bhaduri, Budhendra L.

    2016-07-05

    A programmable media includes a graphical processing unit in communication with a memory element. The graphical processing unit is configured to detect one or more settlement regions from a high resolution remote sensed image based on the execution of programming code. The graphical processing unit identifies one or more settlements through the execution of the programming code that executes a multi-instance learning algorithm that models portions of the high resolution remote sensed image. The identification is based on spectral bands transmitted by a satellite and on selected designations of the image patches.

  17. How do local and remote processes affect the distribution of iron in the Atlantic Ocean?

    NASA Astrophysics Data System (ADS)

    Tagliabue, A.; Boyd, P.; Rijkenberg, M. J. A.; Williams, R. G.

    2016-02-01

    Iron (Fe) plays an important role in governing the magnitudes and patterns of primary productivity, nitrogen fixation and phytoplankton community composition across the Atlantic Ocean. Variations in the supply of Fe to surface waters across the mixed layer interface, over seasonal to annual to decadal scales, are underpinned by it's vertical profile. Traditionally, nutrient profiles are understood in terms of surface depletion and subsurface regeneration, but for Fe this is more complicated due to the role of scavenging and organic complexation by ligands, as well as subsurface sources. This means that the Fe profile may be controlled locally, by sinking, regeneration and scavenging or remotely, by the upstream conditions of subducted water masses. Subduction drives the transfer of Fe across the interface between winter mixed layer and the ocean interior, but has received little attention thus far. Via the subduction of watermasses with distinct biogeochemical signatures to low latitudes, remote processes can regulate the Atlantic Ocean Fe distribution at local scales. Specifically, the formation of mode waters with excess Fe binding ligands (positive L*) enable these waters to stabilise any Fe flux from regeneration that would otherwise be lost by scavenging. The pattern of mode water ventilation then highlights those regions of the ocean where local processes are able to influence the Fe profile. Local process that augment L*, such as the production of ligands during particle regeneration, can also interact with the larger scale ventilation signature but do not alter the main trends. By applying our framework to recent GEOTRACES datasets over the Atlantic Ocean we are able to highlight regions where the Fe profile is forced locally or remotely, thereby providing an important process-based constraint on the biogeochemical models we rely on for future projections. Furthermore, we are able to appraise how the varying influence of local and remote processes drives the degree of agreement in the vertical profiles of Fe and macronutrients, which then sets the degree of surface water Fe limitation.

  18. CDC WONDER: a cooperative processing architecture for public health.

    PubMed Central

    Friede, A; Rosen, D H; Reid, J A

    1994-01-01

    CDC WONDER is an information management architecture designed for public health. It provides access to information and communications without the user's needing to know the location of data or communication pathways and mechanisms. CDC WONDER users have access to extractions from some 40 databases; electronic mail (e-mail); and surveillance data processing. System components include the Remote Client, the Communications Server, the Queue Managers, and Data Servers and Process Servers. The Remote Client software resides in the user's machine; other components are at the Centers for Disease Control and Prevention (CDC). The Remote Client, the Communications Server, and the Applications Server provide access to the information and functions in the Data Servers and Process Servers. The system architecture is based on cooperative processing, and components are coupled via pure message passing, using several protocols. This architecture allows flexibility in the choice of hardware and software. One system limitation is that final results from some subsystems are obtained slowly. Although designed for public health, CDC WONDER could be useful for other disciplines that need flexible, integrated information exchange. PMID:7719813

  19. Low-temperature oxidizing plasma surface modification and composite polymer thin-film fabrication techniques for tailoring the composition and behavior of polymer surfaces

    NASA Astrophysics Data System (ADS)

    Tompkins, Brendan D.

    This dissertation examines methods for modifying the composition and behavior of polymer material surfaces. This is accomplished using (1) low-temperature low-density oxidizing plasmas to etch and implant new functionality on polymers, and (2) plasma enhanced chemical vapor deposition (PECVD) techniques to fabricate composite polymer materials. Emphases are placed on the structure of modified polymer surfaces, the evolution of polymer surfaces after treatment, and the species responsible for modifying polymers during plasma processing. H2O vapor plasma modification of high-density polyethylene (HDPE), low-density polyethylene (LDPE), polypropylene (PP), polystyrene (PS), polycarbonate (PC), and 75A polyurethane (PU) was examined to further our understanding of polymer surface reorganization leading to hydrophobic recovery. Water contact angles (wCA) measurements showed that PP and PS were the most susceptible to hydrophobic recovery, while PC and HDPE were the most stable. X-ray photoelectron spectroscopy (XPS) revealed a significant quantity of polar functional groups on the surface of all treated polymer samples. Shifts in the C1s binding energies (BE) with sample age were measured on PP and PS, revealing that surface reorganization was responsible for hydrophobic recovery on these materials. Differential scanning calorimetry (DSC) was used to rule out the intrinsic thermal properties as the cause of reorganization and hydrophobic recovery on HDPE, LDPE, and PP. The different contributions that polymer cross-linking and chain scission mechanisms make to polymer aging effects are considered. The H2O plasma treatment technique was extended to the modification of 0.2 microm and 3.0 microm track-etched polycarbonate (PC-TE) and track-etched polyethylene terephthalate (PET-TE) membranes with the goal of permanently increasing the hydrophilicity of the membrane surfaces. Contact angle measurements on freshly treated and aged samples confirmed the wettability of the membrane surfaces was significantly improved by plasma treatment. XPS and SEM analyses revealed increased oxygen incorporation onto the surface of the membranes, without any damage to the surface or pore structure. Contact angle measurements on a membrane treated in a stacked assembly suggest the plasma effectively modified the entire pore cross section. Plasma treatment also increased water flux through the membranes, with results from plasma modified membranes matching those from commercially available hydrophilic membranes (treated with wetting agent). Mechanisms for the observed modification are discussed in terms of OH and O radicals implanting oxygen functionality into the polymers. Oxidizing plasma systems (O2, CO2, H2O vapor, and formic acid vapor) were used to modify track-etched polycarbonate membranes and explore the mechanisms and species responsible for etching polycarbonate during plasma processing. Etch rates were measured using scanning electron microscopy; modified polycarbonate surfaces were further characterized using x-ray photoelectron spectroscopy and water contact angles. Etch rates and surface characterization results were combined with optical emission spectroscopy data used to identify gas-phase species and their relative densities. Although the oxide functionalities implanted by each plasma system were similar, the H2O vapor and formic acid vapor plasmas yielded the lowest contact angles after treatment. The CO2, H2O vapor, and formic acid vapor plasma-modified surfaces were, however, found to be similarly stable one month after treatment. Overall, etch rate correlated directly to the relative gas-phase density of atomic oxygen and, to a lesser extent, hydroxyl radicals. PECVD of acetic acid vapor (CH3COOH) was used to deposit films on PC-TE and silicon wafer substrates. The CH3COOH films were characterized using XPS, wCA, and SEM. This modification technique resulted in continuous deposition and self-limiting deposition of a-CxO yHz films on Si wafers and PC-TE, respectively. The self-limiting deposition on PC-TE revealed that resulting films have minimal impact on 3D PC structures. This technique would allow for more precise fabrication of patterned or nano-textured PC. PECVD is used to synthesize hydrocarbon/fluorocarbon thin films with compositional gradients by continuously changing the ratio of gases in a C 3F8/H2 plasma. The films are characterized using variable angle spectroscopic ellipsometry (VASE), Fourier transform infrared spectroscopy (FTIR), XPS, wCA, and SEM. These methods revealed that shifting spectroscopic signals can be used to characterize organization in the deposited film. Using these methods, along with gas-phase diagnostics, film chemistry and the underlying deposition mechanisms are elucidated, leading to a model that accurately predicts film thickness.

  20. Use of remote sensing for land use policy formulation

    NASA Technical Reports Server (NTRS)

    1981-01-01

    Progress in studies for using remotely sensed data for assessing crop stress and in crop estimation is reported. The estimation of acreage of small forested areas in the southern lower peninsula of Michigan using LANDSAT data is evaluated. Damage to small grains caused by the cereal leaf beetle was assessed through remote sensing. The remote detection of X-disease of peach and cherry trees and of fire blight of pear and apple trees was investigated. The reliability of improving on standard methods of crop production estimation was demonstrated. Areas of virus infestation in vineyards and blueberry fields in western and southwestern Michigan were identified. The installation and systems integration of a microcomputer system for processing and making available remotely sensed data are described.

  1. Single transmission line data acquisition system

    DOEpatents

    Fasching, George E.

    1984-01-01

    A single transmission line interrogated multiple channel data acquisition system is provided in which a plurality of remote station/sensors monitor specific process variables and transmit measurement values over the single transmission line to a master station when addressed by the master station. Power for all remote stations (up to 980) is provided by driving the line with constant voltage supplied from the master station and automatically maintained independent of the number of remote stations directly connected to the line. The transmission line can be an RG-62 coaxial cable with lengths up to about 10,000 feet with branches up to 500 feet. The remote stations can be attached randomly along the line. The remote stations can be scanned at rates up to 980 channels/second.

  2. Investigation related to multispectral imaging systems

    NASA Technical Reports Server (NTRS)

    Nalepka, R. F.; Erickson, J. D.

    1974-01-01

    A summary of technical progress made during a five year research program directed toward the development of operational information systems based on multispectral sensing and the use of these systems in earth-resource survey applications is presented. Efforts were undertaken during this program to: (1) improve the basic understanding of the many facets of multispectral remote sensing, (2) develop methods for improving the accuracy of information generated by remote sensing systems, (3) improve the efficiency of data processing and information extraction techniques to enhance the cost-effectiveness of remote sensing systems, (4) investigate additional problems having potential remote sensing solutions, and (5) apply the existing and developing technology for specific users and document and transfer that technology to the remote sensing community.

  3. Quantitative Infrared Spectroscopy in Challenging Environments: Applications to Passive Remote Sensing and Process Monitoring

    DTIC Science & Technology

    2012-12-01

    IR remote sensing o ers a measurement method to detect gaseous species in the outdoor environment. Two major obstacles limit the application of this... method in quantitative analysis : (1) the e ect of both temperature and concentration on the measured spectral intensities and (2) the di culty and...crucial. In this research, particle swarm optimization, a population- based optimization method was applied. Digital ltering and wavelet processing methods

  4. Remote terminal system evaluation

    NASA Technical Reports Server (NTRS)

    Phillips, T. L.; Grams, H. L.; Lindenlaub, J. C.; Schwingendorf, S. K.; Swain, P. H.; Simmons, W. R.

    1975-01-01

    An Earth Resources Data Processing System was developed to evaluate the system for training, technology transfer, and data processing. In addition to the five sites included in this project two other sites were connected to the system under separate agreements. The experience of these two sites is discussed. The results of the remote terminal project are documented in seven reports: one from each of the five project sites, Purdue University, and an overview report summarizing the other six reports.

  5. Potential for Remotely Sensed Soil Moisture Data in Hydrologic Modeling

    NASA Technical Reports Server (NTRS)

    Engman, Edwin T.

    1997-01-01

    Many hydrologic processes display a unique signature that is detectable with microwave remote sensing. These signatures are in the form of the spatial and temporal distributions of surface soil moisture and portray the spatial heterogeneity of hydrologic processes and properties that one encounters in drainage basins. The hydrologic processes that may be detected include ground water recharge and discharge zones, storm runoff contributing areas, regions of potential and less than potential ET, and information about the hydrologic properties of soils and heterogeneity of hydrologic parameters. Microwave remote sensing has the potential to detect these signatures within a basin in the form of volumetric soil moisture measurements in the top few cm. These signatures should provide information on how and where to apply soil physical parameters in distributed and lumped parameter models and how to subdivide drainage basins into hydrologically similar sub-basins.

  6. Discrimination of fluoride and phosphate contamination in central Florida for analyses of environmental effects

    NASA Technical Reports Server (NTRS)

    Coker, A. E.; Marshall, R.; Thomson, F.

    1972-01-01

    A study was made of the spatial registration of fluoride and phosphate pollution parameters in central Florida by utilizing remote sensing techniques. Multispectral remote sensing data were collected over the area and processed to produce multispectral recognition maps. These processed data were used to map land areas and waters containing concentrations of fluoride and phosphate. Maps showing distribution of affected and unaffected vegetation were produced. In addition, the multispectral data were processed by single band radiometric slicing to produce radiometric maps used to delineate areas of high ultraviolet radiance, which indicates high fluoride concentrations. The multispectral parameter maps and radiometric maps in combination showed distinctive patterns, which are correlated with areas known to be affected by fluoride and phosphate contamination. These remote sensing techniques have the potential for regional use to assess the environmental impact of fluoride and phosphate wastes in central Florida.

  7. A real-time MTFC algorithm of space remote-sensing camera based on FPGA

    NASA Astrophysics Data System (ADS)

    Zhao, Liting; Huang, Gang; Lin, Zhe

    2018-01-01

    A real-time MTFC algorithm of space remote-sensing camera based on FPGA was designed. The algorithm can provide real-time image processing to enhance image clarity when the remote-sensing camera running on-orbit. The image restoration algorithm adopted modular design. The MTF measurement calculation module on-orbit had the function of calculating the edge extension function, line extension function, ESF difference operation, normalization MTF and MTFC parameters. The MTFC image filtering and noise suppression had the function of filtering algorithm and effectively suppressing the noise. The algorithm used System Generator to design the image processing algorithms to simplify the design structure of system and the process redesign. The image gray gradient dot sharpness edge contrast and median-high frequency were enhanced. The image SNR after recovery reduced less than 1 dB compared to the original image. The image restoration system can be widely used in various fields.

  8. Bringing an ecological view of change to Landsat-based remote sensing

    USGS Publications Warehouse

    Kennedy, Robert E.; Andrefouet, Serge; Cohen, Warren; Gomez, Cristina; Griffiths, Patrick; Hais, Martin; Healey, Sean; Helmer, Eileen H.; Hostert, Patrick; Lyons, Mitchell; Meigs, Garrett; Pflugmacher, Dirk; Phinn, Stuart; Powell, Scott; Scarth, Peter; Susmita, Sen; Schroeder, Todd A.; Schneider, Annemarie; Sonnenschein, Ruth; Vogelmann, James; Wulder, Michael A.; Zhu, Zhe

    2014-01-01

    When characterizing the processes that shape ecosystems, ecologists increasingly use the unique perspective offered by repeat observations of remotely sensed imagery. However, the concept of change embodied in much of the traditional remote-sensing literature was primarily limited to capturing large or extreme changes occurring in natural systems, omitting many more subtle processes of interest to ecologists. Recent technical advances have led to a fundamental shift toward an ecological view of change. Although this conceptual shift began with coarser-scale global imagery, it has now reached users of Landsat imagery, since these datasets have temporal and spatial characteristics appropriate to many ecological questions. We argue that this ecologically relevant perspective of change allows the novel characterization of important dynamic processes, including disturbances, long-term trends, cyclical functions, and feedbacks, and that these improvements are already facilitating our understanding of critical driving forces, such as climate change, ecological interactions, and economic pressures.

  9. Implementation of Remote 3-Dimensional Image Guided Radiation Therapy Quality Assurance for Radiation Therapy Oncology Group Clinical Trials

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Cui Yunfeng; Galvin, James M.; Radiation Therapy Oncology Group, American College of Radiology, Philadelphia, Pennsylvania

    2013-01-01

    Purpose: To report the process and initial experience of remote credentialing of three-dimensional (3D) image guided radiation therapy (IGRT) as part of the quality assurance (QA) of submitted data for Radiation Therapy Oncology Group (RTOG) clinical trials; and to identify major issues resulting from this process and analyze the review results on patient positioning shifts. Methods and Materials: Image guided radiation therapy datasets including in-room positioning CT scans and daily shifts applied were submitted through the Image Guided Therapy QA Center from institutions for the IGRT credentialing process, as required by various RTOG trials. A centralized virtual environment is establishedmore » at the RTOG Core Laboratory, containing analysis tools and database infrastructure for remote review by the Physics Principal Investigators of each protocol. The appropriateness of IGRT technique and volumetric image registration accuracy were evaluated. Registration accuracy was verified by repeat registration with a third-party registration software system. With the accumulated review results, registration differences between those obtained by the Physics Principal Investigators and from the institutions were analyzed for different imaging sites, shift directions, and imaging modalities. Results: The remote review process was successfully carried out for 87 3D cases (out of 137 total cases, including 2-dimensional and 3D) during 2010. Frequent errors in submitted IGRT data and challenges in the review of image registration for some special cases were identified. Workarounds for these issues were developed. The average differences of registration results between reviewers and institutions ranged between 2 mm and 3 mm. Large discrepancies in the superior-inferior direction were found for megavoltage CT cases, owing to low spatial resolution in this direction for most megavoltage CT cases. Conclusion: This first experience indicated that remote review for 3D IGRT as part of QA for RTOG clinical trials is feasible and effective. The magnitude of registration discrepancy between institution and reviewer was presented, and the major issues were investigated to further improve this remote evaluation process.« less

  10. A REMOTE SENSING AND GIS-ENABLED HIGHWAY ASSET MANAGEMENT SYSTEM PHASE 2

    DOT National Transportation Integrated Search

    2018-02-02

    The objective of this project is to validate the use of commercial remote sensing and spatial information (CRS&SI) technologies, including emerging 3D line laser imaging technology, mobile light detection and ranging (LiDAR), image processing algorit...

  11. MISCELLANEOUS ARCHITECTURAL DETAILS AND SECTIONS OF REMOTE ANALYTICAL FACILITY (CPP627). ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    MISCELLANEOUS ARCHITECTURAL DETAILS AND SECTIONS OF REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-0627-00-098-105632. ALTERNATE ID NUMBER 4272-814-135. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  12. NORTH AND SOUTH SECTIONS OF REMOTE ANALYTICAL FACILITY (CPP627). INL ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    NORTH AND SOUTH SECTIONS OF REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-0627-00-098-105068. ALTERNATE ID NUMBER 4272-14-105. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  13. EAST AND WEST ELEVATIONS OF REMOTE ANALYTICAL FACILITY (CPP627). INL ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    EAST AND WEST ELEVATIONS OF REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-0627-00-098-105067. ALTERNATE ID NUMBER 4272-14-104. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  14. INTERIOR PHOTO OF THE REMOTE ANALYTICAL FACILITY OF SHIELDED GLOVE ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    INTERIOR PHOTO OF THE REMOTE ANALYTICAL FACILITY OF SHIELDED GLOVE BOXES IN OPERATING CORRIDOR (CPP-627). INL PHOTO NUMBER NRTS-55-1524. Unknown Photographer, 1955 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  15. CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP627) SHOWING PLACEMENT ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    CONSTRUCTION PROGRESS PHOTO OF REMOTE ANALYTICAL FACILITY (CPP-627) SHOWING PLACEMENT OF PIERS. INL PHOTO NUMBER NRTS-54-11716. Unknown Photographer, 8/20/1954 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  16. A remote sensing and GIS-enabled highway asset management system : final report.

    DOT National Transportation Integrated Search

    2016-04-01

    The objective of this project is to validate the use of commercial remote sensing and spatial information : (CRS&SI) technologies, including emerging 3D line laser imaging technology, mobile LiDAR, image : processing algorithms, and GPS/GIS technolog...

  17. A Multi-User Remote Academic Laboratory System

    ERIC Educational Resources Information Center

    Barrios, Arquimedes; Panche, Stifen; Duque, Mauricio; Grisales, Victor H.; Prieto, Flavio; Villa, Jose L.; Chevrel, Philippe; Canu, Michael

    2013-01-01

    This article describes the development, implementation and preliminary operation assessment of Multiuser Network Architecture to integrate a number of Remote Academic Laboratories for educational purposes on automatic control. Through the Internet, real processes or physical experiments conducted at the control engineering laboratories of four…

  18. Thermal stress during RTP processes and its possible effect on the light induced degradation in Cz-Si wafers

    NASA Astrophysics Data System (ADS)

    Kouhlane, Yacine; Bouhafs, Djoudi; Khelifati, Nabil; Guenda, Abdelkader; Demagh, Nacer-Eddine; Demagh, Assia; Pfeiffer, Pierre; Mezghiche, Salah; Hetatache, Warda; Derkaoui, Fahima; Nasraoui, Chahinez; Nwadiaru, Ogechi Vivian

    2018-04-01

    In this study, the carrier lifetime variation of p-type boron-doped Czochralski silicon (Cz-Si) wafers was investigated after a direct rapid thermal processing (RTP). Two wafers were passivated by silicon nitride (SiNx:H) layers, deposited by a PECVD system on both surfaces. Then the wafers were subjected to an RTP cycle at a peak temperature of 620 °C. The first wafer was protected (PW) from the direct radiative heating of the RTP furnace by placing the wafer between two as-cut Cz-Si shield wafers during the heat processing. The second wafer was not protected (NPW) and followed the same RTP cycle procedure. The carrier lifetime τ eff was measured using the QSSPC technique before and after illumination for 5 h duration at 0.5 suns. The immediate results of the measured lifetime (τ RTP ) after the RTP process have shown a regeneration in the lifetime of the two wafers with the PW wafer exhibiting an important enhancement in τ RTP as compared to the NPW wafer. The QSSPC measurements have indicated a good stable lifetime (τ d ) and a weak degradation effect was observed in the case of the PW wafer as compared to their initial lifetime value. Interferometry technique analyses have shown an enhancement in the surface roughness for the NPW wafer as compared to the protected one. Additionally, to improve the correlation between the RTP heat radiation stress and the carrier lifetime behavior, a simulation of the thermal stress and temperature profile using the finite element method on the wafers surface at RTP peak temperature of 620 °C was performed. The results confirm the reduction of the thermal stress with less heat losses for the PW wafer. Finally, the proposed method can lead to improving the lifetime of wafers by an RTP process at minimum energy costs.

  19. Capturing remote mixing due to internal tides using multi-scale modeling tool: SOMAR-LES

    NASA Astrophysics Data System (ADS)

    Santilli, Edward; Chalamalla, Vamsi; Scotti, Alberto; Sarkar, Sutanu

    2016-11-01

    Internal tides that are generated during the interaction of an oscillating barotropic tide with the bottom bathymetry dissipate only a fraction of their energy near the generation region. The rest is radiated away in the form of low- high-mode internal tides. These internal tides dissipate energy at remote locations when they interact with the upper ocean pycnocline, continental slope, and large scale eddies. Capturing the wide range of length and time scales involved during the life-cycle of internal tides is computationally very expensive. A recently developed multi-scale modeling tool called SOMAR-LES combines the adaptive grid refinement features of SOMAR with the turbulence modeling features of a Large Eddy Simulation (LES) to capture multi-scale processes at a reduced computational cost. Numerical simulations of internal tide generation at idealized bottom bathymetries are performed to demonstrate this multi-scale modeling technique. Although each of the remote mixing phenomena have been considered independently in previous studies, this work aims to capture remote mixing processes during the life cycle of an internal tide in more realistic settings, by allowing multi-level (coarse and fine) grids to co-exist and exchange information during the time stepping process.

  20. H-II launch vehicle telemetry system realizing intelligent control of pre-processed data from remote terminal

    NASA Astrophysics Data System (ADS)

    Tanioka, Noritaka; Yoshida, Yasunori; Obi, Shinzo; Chiba, Ryoichi; Nakai, Kazumoto

    The development of a PCM telemetry system for the Japanese H-II launch vehicle is discussed. PCM data streams acquire and process data from remote terminals which can be located at any place near the data source. The data are synchronized by a clock and are individually controlled by a central PCM data processing unit. The system allows the launch vehicle to acquire data from many different areas of the rocket, with a total of 879 channels. The data are multiplexed and processed into one PCM data stream and are down-linked on a phase-modulated RF carrier.

  1. A generalized architecture of quantum secure direct communication for N disjointed users with authentication

    NASA Astrophysics Data System (ADS)

    Farouk, Ahmed; Zakaria, Magdy; Megahed, Adel; Omara, Fatma A.

    2015-11-01

    In this paper, we generalize a secured direct communication process between N users with partial and full cooperation of quantum server. So, N - 1 disjointed users u1, u2, …, uN-1 can transmit a secret message of classical bits to a remote user uN by utilizing the property of dense coding and Pauli unitary transformations. The authentication process between the quantum server and the users are validated by EPR entangled pair and CNOT gate. Afterwards, the remained EPR will generate shared GHZ states which are used for directly transmitting the secret message. The partial cooperation process indicates that N - 1 users can transmit a secret message directly to a remote user uN through a quantum channel. Furthermore, N - 1 users and a remote user uN can communicate without an established quantum channel among them by a full cooperation process. The security analysis of authentication and communication processes against many types of attacks proved that the attacker cannot gain any information during intercepting either authentication or communication processes. Hence, the security of transmitted message among N users is ensured as the attacker introduces an error probability irrespective of the sequence of measurement.

  2. A generalized architecture of quantum secure direct communication for N disjointed users with authentication.

    PubMed

    Farouk, Ahmed; Zakaria, Magdy; Megahed, Adel; Omara, Fatma A

    2015-11-18

    In this paper, we generalize a secured direct communication process between N users with partial and full cooperation of quantum server. So, N - 1 disjointed users u1, u2, …, uN-1 can transmit a secret message of classical bits to a remote user uN by utilizing the property of dense coding and Pauli unitary transformations. The authentication process between the quantum server and the users are validated by EPR entangled pair and CNOT gate. Afterwards, the remained EPR will generate shared GHZ states which are used for directly transmitting the secret message. The partial cooperation process indicates that N - 1 users can transmit a secret message directly to a remote user uN through a quantum channel. Furthermore, N - 1 users and a remote user uN can communicate without an established quantum channel among them by a full cooperation process. The security analysis of authentication and communication processes against many types of attacks proved that the attacker cannot gain any information during intercepting either authentication or communication processes. Hence, the security of transmitted message among N users is ensured as the attacker introduces an error probability irrespective of the sequence of measurement.

  3. [Small unmanned aerial vehicles for low-altitude remote sensing and its application progress in ecology.

    PubMed

    Sun, Zhong Yu; Chen, Yan Qiao; Yang, Long; Tang, Guang Liang; Yuan, Shao Xiong; Lin, Zhi Wen

    2017-02-01

    Low-altitude unmanned aerial vehicles (UAV) remote sensing system overcomes the deficiencies of space and aerial remote sensing system in resolution, revisit period, cloud cover and cost, which provides a novel method for ecological research on mesoscale. This study introduced the composition of UAV remote sensing system, reviewed its applications in species, population, community and ecosystem ecology research. Challenges and opportunities of UAV ecology were identified to direct future research. The promising research area of UAV ecology includes the establishment of species morphology and spectral characteristic data base, species automatic identification, the revelation of relationship between spectral index and plant physiological processes, three-dimension monitoring of ecosystem, and the integration of remote sensing data from multi resources and multi scales. With the development of UAV platform, data transformation and sensors, UAV remote sensing technology will have wide application in ecology research.

  4. Radial junction solar cells based on heterojunction with intrinsic thin layer (HIT) structure

    NASA Astrophysics Data System (ADS)

    Shen, Haoting

    The radial junction wire array structure was previously proposed as a solar cell geometry to separate the direction of carrier collection from the direction of light absorption, thereby circumventing the need to use high quality but expensive single crystal silicon (c-Si) material that has long minority carrier diffusion lengths. The Si radial junction structure can be realized by forming radial p-n junctions on Si pillar/wire arrays that have a diameter comparable to the minority carrier diffusion length. With proper design, the Si pillar arrays are also able to enhance light trapping and thereby increase the light absorption. However, the larger junction area and surface area on the pillar arrays compared to traditional planar junction Si solar cells makes it challenging to fabricate high performance devices due an in increase in surface defects. Therefore, effective surface passivation strategies are essential for radial junction devices. Hydrogenated amorphous silicon (a-Si:H) deposited by plasma-enhanced chemical vapor deposition (PECVD) using a heterojunction with intrinsic thin layer (HIT) structure has previously been demonstrated as a very effective surface passivation layer for planar c-Si solar cells. It is therefore of interest to use a-Si:H in a HIT layer structure for radial p-n junction c-Si pillar array solar cells. This poses several challenges, however, including the need to fabricate ultra-thin a-Si:H layers conformally on high aspect ratio Si pillars, control the crystallinity at the a-Si:H/c-Si interface to yield a low interface state density and optimize the layer thicknesses, doping and contacts to yield high performance devices. This research in this thesis was aimed at developing the processing technology required to apply the HIT structure to radial junction Si pillar array solar cell devices and to evaluate the device characteristics. Initial studies focused on understanding the effects of process conditions on the growth rate and conformality of a-Si:H deposited by PECVD using SiH4 and H 2 on high aspect ratio trench structures. Experimentally, it was found that the a-Si:H growth rate increased with increasing SiH4 flow rate up to a point after which it saturated at a maximum growth rate. In addition, it was found that higher SiH4 flow rates resulted in improved thickness uniformity along the trenches. A model based on gas transport and surface reaction of SiH3 in trenches was developed and was used to explain the experimental results and predict conditions that would yield improved thickness uniformity. The knowledge gained in the PECVD deposition studies was then used to prepare HIT radial junction Si pillar array solar cell devices. Deep reactive ion etching (DRIE) was used to prepare Si pillar arrays on p-type (111) c-Si wafers. A process was developed to prepare n-type a-Si:H films from SiH 4 and H2, with PH3 as doping gas. Indium tin oxide (ITO) deposited by sputter deposition and Al-doped ZnO deposited by atomic layer deposition (ALD) were evaluated as transparent conductive top contacts to the n-type a-Si:H layer. By adjusting the SiH4/H2 gas flow ratio, intrinsic a-Si:H was grown on the c-Si surface without epitaxial micro-crystalline growth. Continuous and pulsed deposition modes were investigated for deposition of the intrinsic and n-type a-Si:H layers on the c-Si pillars. The measurements of device light performance shown that slightly lower short circuit current density (Jsc, 32 mA/cm2 to 35 mA/cm 2) but higher open circuit voltage (Voc, 0.56 V to .47 V) were obtained on the pulsed devices. As the result, higher efficiency (11.6%) was achieved on the pulsed devices (10.6% on the continuous device). The improved performance of the pulsed deposition devices was explained as arising from a higher SiH3 concentration in the initial plasma which lead to a more uniform layer thickness. Planar and radial junction Si wire array HIT solar cell devices were then fabricated and the device performance was compared. A series of p-type c-Si wafers with varying resistivity/doping density were used for this study in order to evaluate the effect of carrier diffusion length on device performance. The saturation current densities (J0) of the radial junction devices were consistently larger than that of the planar devices as a result of the larger junction area. Despite the increased leakage currents, the radial junction HIT cells exhibited similar Voc compared to the planar cells. In addition, at high doping densities (5˜1018 cm-3), the J sc (16.7mA/cm2) and collection efficiency (6.3%) of the radial junction devices was higher than that of comparable planar cells (J sc 12.7 mA/cm2 and efficiency 5.2%), demonstrating improved collection of photogenerated carriers in this geometry.

  5. A Novel Methodology for Improving Plant Pest Surveillance in Vineyards and Crops Using UAV-Based Hyperspectral and Spatial Data.

    PubMed

    Vanegas, Fernando; Bratanov, Dmitry; Powell, Kevin; Weiss, John; Gonzalez, Felipe

    2018-01-17

    Recent advances in remote sensed imagery and geospatial image processing using unmanned aerial vehicles (UAVs) have enabled the rapid and ongoing development of monitoring tools for crop management and the detection/surveillance of insect pests. This paper describes a (UAV) remote sensing-based methodology to increase the efficiency of existing surveillance practices (human inspectors and insect traps) for detecting pest infestations (e.g., grape phylloxera in vineyards). The methodology uses a UAV integrated with advanced digital hyperspectral, multispectral, and RGB sensors. We implemented the methodology for the development of a predictive model for phylloxera detection. In this method, we explore the combination of airborne RGB, multispectral, and hyperspectral imagery with ground-based data at two separate time periods and under different levels of phylloxera infestation. We describe the technology used-the sensors, the UAV, and the flight operations-the processing workflow of the datasets from each imagery type, and the methods for combining multiple airborne with ground-based datasets. Finally, we present relevant results of correlation between the different processed datasets. The objective of this research is to develop a novel methodology for collecting, processing, analising and integrating multispectral, hyperspectral, ground and spatial data to remote sense different variables in different applications, such as, in this case, plant pest surveillance. The development of such methodology would provide researchers, agronomists, and UAV practitioners reliable data collection protocols and methods to achieve faster processing techniques and integrate multiple sources of data in diverse remote sensing applications.

  6. Evaluation of a mobile screening service for abdominal aortic aneurysm in Broken Hill, a remote regional centre in far western NSW.

    PubMed

    Lesjak, Margaret S; Flecknoe-Brown, Stephen C; Sidford, Jan R; Payne, Kerryn; Fletcher, John P; Lyle, David M

    2010-04-01

    To evaluate the feasibility of a mobile screening service model for abdominal aortic aneurysm (AAA) in a remote population centre in Australia. Screening test evaluation. A remote regional centre (population: 20 000) in far western NSW. Men aged 65-74 years, identified from the Australian Electoral roll. A mobile screening service using directed ultrasonography, a basic health check and post-screening consultation. Attendance at the screening program, occurrence of AAA in the target population and effectiveness of screening processes. A total of 516 men without a previous diagnosis of AAA were screened, an estimated response rate of 60%. Of these, 463 (89.7%) had a normal aortic diameter, 28 (5.4%) ectatic and 25 (4.9%) a small, moderate or significant aneurysm. Two men with AAA were recommended for surgery. Feedback from participants indicated that the use of a personalised letter of invitation helped with recruitment, that the screening process was acceptable and the service valued. It is feasible to organise and operate a mobile AAA screening service from moderate sized rural and remote population centres. This model could be scaled up to provide national coverage for rural and remote residents.

  7. A 'user friendly' geographic information system in a color interactive digital image processing system environment

    NASA Technical Reports Server (NTRS)

    Campbell, W. J.; Goldberg, M.

    1982-01-01

    NASA's Eastern Regional Remote Sensing Applications Center (ERRSAC) has recognized the need to accommodate spatial analysis techniques in its remote sensing technology transfer program. A computerized Geographic Information System to incorporate remotely sensed data, specifically Landsat, with other relevant data was considered a realistic approach to address a given resource problem. Questions arose concerning the selection of a suitable available software system to demonstrate, train, and undertake demonstration projects with ERRSAC's user community. The very specific requirements for such a system are discussed. The solution found involved the addition of geographic information processing functions to the Interactive Digital Image Manipulation System (IDIMS). Details regarding the functions of the new integrated system are examined along with the characteristics of the software.

  8. Biogeochemical cycling in terrestrial ecosystems - Modeling, measurement, and remote sensing

    NASA Technical Reports Server (NTRS)

    Peterson, D. L.; Matson, P. A.; Lawless, J. G.; Aber, J. D.; Vitousek, P. M.

    1985-01-01

    The use of modeling, remote sensing, and measurements to characterize the pathways and to measure the rate of biogeochemical cycling in forest ecosystems is described. The application of the process-level model to predict processes in intact forests and ecosystems response to disturbance is examined. The selection of research areas from contrasting climate regimes and sites having a fertility gradient in that regime is discussed, and the sites studied are listed. The use of remote sensing in determining leaf area index and canopy biochemistry is analyzed. Nitrous oxide emission is investigated by using a gas measurement instrument. Future research projects, which include studying the influence of changes on nutrient cycling in ecosystems and the effect of pollutants on the ecosystems, are discussed.

  9. The application of remote sensing to resource management and environmental quality programs in Kansas

    NASA Technical Reports Server (NTRS)

    Barr, B. G.; Martinko, E. A. (Principal Investigator)

    1982-01-01

    Capabilities to process data for state agencies in Kansas were upgraded through the vehicle of a low cost data processing system. Short term projects in which agencies identified areas of immediate needs, and longer terms projects, continued from previous years, are described including studies of Arkansas River irrigation; evaluation of rangeland in the Cimarron National Grassland; a model of the Walnut Creek watershed groundwater; selection of a pronghorn antelope release site; the establishment of a geographical data base for tax reassessment in Finney County; a land use/land cover inventory and hazards assessment; and applied R & D in agricultural remote sensing. The topics discussed at a short course in remote sensing and publications are listed.

  10. Hi-Tech for Archeology

    NASA Technical Reports Server (NTRS)

    1987-01-01

    Remote sensing is the process of acquiring physical information from a distance, obtaining data on Earth features from a satellite or an airplane. Advanced remote sensing instruments detect radiations not visible to the ordinary camera or the human eye in several bands of the spectrum. These data are computer processed to produce multispectral images that can provide enormous amounts of information about Earth objects or phenomena. Since every object on Earth emits or reflects radiation in its own unique signature, remote sensing data can be interpreted to tell the difference between one type of vegetation and another, between densely populated urban areas and lightly populated farmland, between clear and polluted water or in the archeological application between rain forest and hidden man made structures.

  11. Remote sensing, imaging, and signal engineering

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    Brase, J.M.

    1993-03-01

    This report discusses the Remote Sensing, Imaging, and Signal Engineering (RISE) trust area which has been very active in working to define new directions. Signal and image processing have always been important support for existing programs at Lawrence Livermore National Laboratory (LLNL), but now these technologies are becoming central to the formation of new programs. Exciting new applications such as high-resolution telescopes, radar remote sensing, and advanced medical imaging are allowing us to participate in the development of new programs.

  12. Silicon-based thin-film transistors with a high stability

    NASA Astrophysics Data System (ADS)

    Stannowski, Bernd

    2002-02-01

    Thin-Film Transistors (TFTs) are widely applied as pixel-addressing devices in large-area electronics, such as active-matrix liquid-crystal displays (AMLCDs) or sensor arrays. Hydrogenated amorphous silicon (a-Si:H) and silicon nitride (a-SiNx:H) are generally used as the semiconductor and the insulator layers, respectively. Commonly, Plasma-Enhanced Chemical Vapor Deposition (PECVD) is used to deposit such films on large glass or plastic substrates at rather low substrate temperatures of 200 - 300oC. Even though TFTs are nowadays used in commercial applications, they need further improvement with respect to a number of issues: Firstly, the stability upon prolonged application of a gate voltage results in a shift of the TFT transfer characteristics. This is explained with the metastability of a-Si:H, namely the defect creation in the amorphous channel. This effect hampers the application of TFTs e.g. in the peripheral driver circuitry of AMLCDs and in the addressing matrix of Organic Light-Emitting Diode (OLED) displays. Secondly, the low deposition rate of the silicon limits the throughput in display fabrication. For a further reduction of the production costs higher deposition rates are crucial. This thesis addresses the development and the study of silicon-based TFTs with a high stability. Therefore, a-Si:H and a-SiNx:H films have been deposited with new techniques, alternative to the commonly used PECVD at a discharge frequency of 13.56 MHz. For Very High Frequency (VHF) PECVD we used frequencies in the range of 13.56 - 70 MHz. Furthermore, we deposited layers by Hot-Wire Chemical Vapor Deposition (HWCVD), utilizing heated tantalum or tungsten filaments to decompose the source-gas molecules catalytically. Hot-wire deposited a-SiNx:H layers were developed to be applied as gate insulator. Furthermore, they are promising for passivation purposes, since no surface damaging ion bombardment is present during the deposition. A proof-of-concept for an "All-Hot-Wire TFT" with both the a-Si:H and the a-SiNx:H deposited by HWCVD is presented, yielding a considerable field-effect mobility of 0.3 cm2/Vs. The stability of various a-Si:H TFTs with either plasma a-SiNx:H or thermally grown SiO2 as the gate insulator was investigated by applying constant gate-bias stress of 25 V at temperatures of 20 - 110oC and durations of 10 - 105s. We determined the kinetics of defect-creation in the amorphous silicon by measuring the threshold-voltage shift and merging the data obtained at different stressing temperatures and times to one data set as a function of the "thermalization energy". This scheme was described by Deane et al.. The kinetics follow a stretched hyperbola, which results from dispersive defect creation with an exponential distribution of activation energies. A least-squares fit yields two parameters: kBT0 is the slope of the barrier distribution, with values of (65 ? 3) meV for all TFTs in this stability study. The second parameter, Ea, is interpreted as the "mean activation energy for defect creation". We used it for a comparison of the stability of various TFTs. For VHF-PECVD a-Si:H TFTs, values for Ea were around 0.92 eV and are found to be correlated with the mechanical stress in silicon films: A high value for Ea, thus a high stability, is related to a low compressive stress. For HWCVD a-Si:H the stability clearly increases with increasing deposition temperatures. The highest value being around 1.03 eV is obtained for het-Si:H, deposited at 510?C. From these results we concluded that the stability of a-Si:H is determined by the grade of network relaxation. Higher deposition temperatures result in a more efficient relaxation of the amorphous network. This can be associated with a higher medium-range order. In the case of the plasma-deposited a-Si:H films deposited at one temperature, the relation between Ea and mechanical stress may be a secondary effect, with the mechanical stress being related to the network ordering. In conclusion, HWCVD appears to be an ideal method to deposit highly stable a-Si:H TFTs, since a rather high temperature is combined with an effective hydrogenation, resulting in a-Si:H film with a low and stable defect density.

  13. Guide to remote-sensor data systems

    NASA Technical Reports Server (NTRS)

    Dewitt, R. R.; Ellison, J. L.

    1980-01-01

    Remote sensing data-handbook presents theoretical and practical information on spaceborne sensors and associated systems for Earth-resources applications. Handbook provides discussion on historical information, principles of operations, factors affecting performances, nature of data output, and system required to process data and trends in research and development.

  14. EAST WEST NORTH ELEVATIONS OF MULTICURIE CELL ARCHITECTURAL DETAILS REMOTE ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    EAST WEST NORTH ELEVATIONS OF MULTICURIE CELL ARCHITECTURAL DETAILS REMOTE ANALYTICAL FACILITY (CPP-627). INL DRAWING NUMBER 200-00627-00-706-050245. ALTERNATE ID NUMBER AED-D-245. - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  15. CONSTRUCTION PROGRESS PHOTO REMOTE ANALYTICAL FACILITY (CPP627) SHOWING EMPLACEMENT OF ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    CONSTRUCTION PROGRESS PHOTO REMOTE ANALYTICAL FACILITY (CPP-627) SHOWING EMPLACEMENT OF ROOF SLABS. INL PHOTO NUMBER NRTS-54-13463. R.G. Larsen, Photographer, 12/20/1954 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  16. BROADBAND DIGITAL GEOPHYSICAL TELEMETRY SYSTEM.

    USGS Publications Warehouse

    Seeley, Robert L.; Daniels, Jeffrey J.

    1984-01-01

    A system has been developed to simultaneously sample and transmit digital data from five remote geophysical data receiver stations to a control station that processes, displays, and stores the data. A microprocessor in each remote station receives commands from the control station over a single telemetry channel.

  17. Remote sensing of wildland resources: A state-of-the-art review

    Treesearch

    Robert C. Aldrich

    1979-01-01

    A review, with literature citations, of current remote sensing technology, applications, and costs for wildland resource management, including collection, interpretation, and processing of data gathered through photographic and nonphotographic techniques for classification and mapping, interpretive information for specific applications, measurement of resource...

  18. Small unmanned aircraft systems for remote sensing and Earth science research

    NASA Astrophysics Data System (ADS)

    Hugenholtz, Chris H.; Moorman, Brian J.; Riddell, Kevin; Whitehead, Ken

    2012-06-01

    To understand and predict Earth-surface dynamics, scientists often rely on access to the latest remote sensing data. Over the past several decades, considerable progress has been made in the development of specialized Earth observation sensors for measuring a wide range of processes and features. Comparatively little progress has been made, however, in the development of new platforms upon which these sensors can be deployed. Conventional platforms are still almost exclusively restricted to piloted aircraft and satellites. For many Earth science research questions and applications these platforms do not yet have the resolution or operational flexibility to provide answers affordably. The most effective remote sensing data match the spatiotemporal scale of the process or feature of interest. An emerging technology comprising unmanned aircraft systems (UAS), also known as unmanned aerial vehicles (UAV), is poised to offer a viable alternative to conventional platforms for acquiring high-resolution remote sensing data with increased operational flexibility, lower cost, and greater versatility (Figure 1).

  19. High-resolution remotely sensed small target detection by imitating fly visual perception mechanism.

    PubMed

    Huang, Fengchen; Xu, Lizhong; Li, Min; Tang, Min

    2012-01-01

    The difficulty and limitation of small target detection methods for high-resolution remote sensing data have been a recent research hot spot. Inspired by the information capture and processing theory of fly visual system, this paper endeavors to construct a characterized model of information perception and make use of the advantages of fast and accurate small target detection under complex varied nature environment. The proposed model forms a theoretical basis of small target detection for high-resolution remote sensing data. After the comparison of prevailing simulation mechanism behind fly visual systems, we propose a fly-imitated visual system method of information processing for high-resolution remote sensing data. A small target detector and corresponding detection algorithm are designed by simulating the mechanism of information acquisition, compression, and fusion of fly visual system and the function of pool cell and the character of nonlinear self-adaption. Experiments verify the feasibility and rationality of the proposed small target detection model and fly-imitated visual perception method.

  20. A summary of the history of the development of automated remote sensing for agricultural applications

    NASA Technical Reports Server (NTRS)

    Macdonald, R. B.

    1983-01-01

    The research conducted in the United States for the past 20 years with the objective of developing automated satellite remote sensing for monitoring the earth's major food crops is reviewed. The highlights of this research include a National Academy of Science study on the applicability of remote sensing monitoring given impetus by the introduction in the mid-1960's of the first airborne multispectral scanner (MSS); design simulations for the first earth resource satellite in 1969; and the use of the airborne MSS in the Corn Blight Watch, the first large application of remote sensing in agriculture, in 1970. Other programs discussed include the CITAR research project in 1972 which established the feasibility of automating digital classification to process high volumes of Landsat MSS data; the Large Area Crop Inventory Experiment (LACIE) in 1974-78, which demonstrated automated processing of Landsat MSS data in estimating wheat crop production on a global basis; and AgRISTARS, a program designed to address the technical issues defined by LACIE.

  1. Minefield reconnaissance and detector system

    DOEpatents

    Butler, M.T.; Cave, S.P.; Creager, J.D.; Johnson, C.M.; Mathes, J.B.; Smith, K.J.

    1994-04-26

    A multi-sensor system is described for detecting the presence of objects on the surface of the ground or buried just under the surface, such as anti-personnel or anti-tank mines or the like. A remote sensor platform has a plurality of metal detector sensors and a plurality of short pulse radar sensors. The remote sensor platform is remotely controlled from a processing and control unit and signals from the remote sensor platform are sent to the processing and control unit where they are individually evaluated in separate data analysis subprocess steps to obtain a probability score for each of the pluralities of sensors. These probability scores are combined in a fusion subprocess step by comparing score sets to a probability table which is derived based upon the historical incidence of object present conditions given that score set. A decision making rule is applied to provide an output which is optionally provided to a marker subprocess for controlling a marker device to mark the location of found objects. 7 figures.

  2. Idle waves in high-performance computing

    NASA Astrophysics Data System (ADS)

    Markidis, Stefano; Vencels, Juris; Peng, Ivy Bo; Akhmetova, Dana; Laure, Erwin; Henri, Pierre

    2015-01-01

    The vast majority of parallel scientific applications distributes computation among processes that are in a busy state when computing and in an idle state when waiting for information from other processes. We identify the propagation of idle waves through processes in scientific applications with a local information exchange between the two processes. Idle waves are nondispersive and have a phase velocity inversely proportional to the average busy time. The physical mechanism enabling the propagation of idle waves is the local synchronization between two processes due to remote data dependency. This study provides a description of the large number of processes in parallel scientific applications as a continuous medium. This work also is a step towards an understanding of how localized idle periods can affect remote processes, leading to the degradation of global performance in parallel scientific applications.

  3. A Centrifugal Contactor Design to Facilitate Remote Replacement

    DOE Office of Scientific and Technical Information (OSTI.GOV)

    David H. Meikrantz; Jack. D. Law; Troy G. Garn

    2011-03-01

    Advanced designs of nuclear fuel recycling and radioactive waste treatment plants are expected to include more ambitious goals for solvent extraction based separations including; higher separations efficiency, high-level waste minimization, and a greater focus on continuous processes to minimize cost and footprint. Therefore, Annular Centrifugal Contactors (ACCs) are destined to play a more important role for such future processing schemes. This work continues the development of remote designs for ACCs that can process the large throughputs needed for future nuclear fuel recycling and radioactive waste treatment plants. A three stage, 12.5 cm diameter rotor module has been constructed and ismore » being evaluated for use in highly radioactive environments. This prototype assembly employs three standard CINC V-05 clean-in-place (CIP) units modified for remote service and replacement via new methods of connection for solution inlets, outlets, drain and CIP. Hydraulic testing and functional checks were successfully conducted and then the prototype was evaluated for remote handling and maintenance. Removal and replacement of the center position V-05R contactor in the three stage assembly was demonstrated using an overhead rail mounted PaR manipulator. Initial evaluation indicates a viable new design for interconnecting and cleaning individual stages while retaining the benefits of commercially reliable ACC equipment. Replacement of a single stage via remote manipulators and tools is estimated to take about 30 minutes, perhaps fast enough to support a contactor change without loss of process equilibrium. The design presented in this work is scalable to commercial ACC models from V-05 to V-20 with total throughput rates ranging from 20 to 650 liters per minute.« less

  4. Summaries of the thematic conferences on remote sensing for exploration geology

    NASA Technical Reports Server (NTRS)

    1989-01-01

    The Thematic Conference series was initiated to address the need for concentrated discussion of particular remote sensing applications. The program is primarily concerned with the application of remote sensing to mineral and hydrocarbon exploration, with special emphasis on data integration, methodologies, and practical solutions for geologists. Some fifty invited papers are scheduled for eleven plenary sessions, formulated to address such important topics as basement tectonics and their surface expressions, spectral geology, applications for hydrocarbon exploration, and radar applications and future systems. Other invited presentations will discuss geobotanical remote sensing, mineral exploration, engineering and environmental applications, advanced image processing, and integration and mapping.

  5. Future use of digital remote sensing data

    NASA Technical Reports Server (NTRS)

    Spann, G. W.; Jones, N. L.

    1978-01-01

    Users of remote sensing data are increasingly turning to digital processing techniques for the extraction of land resource, environmental, and natural resource information. This paper presents the results of recent and ongoing research efforts sponsored, in part, by NASA/Marshall Space Flight Center on the current uses of and future needs for digital remote sensing data. An ongoing investigation involves a comprehensive survey of capabilities for digital Landsat data use in the Southeastern U.S. Another effort consists of an evaluation of future needs for digital remote sensing data by federal, state, and local governments and the private sector. These needs are projected into the 1980-1985 time frame. Furthermore, the accelerating use of digital remote sensing data is not limited to the U.S. or even to the developed countries of the world.

  6. Land Use and Change

    NASA Technical Reports Server (NTRS)

    Irwin, Daniel E.

    2004-01-01

    The overall purpose of this training session is to familiarize Central American project cooperators with the remote sensing and image processing research that is being conducted by the NASA research team and to acquaint them with the data products being produced in the areas of Land Cover and Land Use Change and carbon modeling under the NASA SERVIR project. The training session, therefore, will be both informative and practical in nature. Specifically, the course will focus on the physics of remote sensing, various satellite and airborne sensors (Landsat, MODIS, IKONOS, Star-3i), processing techniques, and commercial off the shelf image processing software.

  7. Architectures Toward Reusable Science Data Systems

    NASA Technical Reports Server (NTRS)

    Moses, John Firor

    2014-01-01

    Science Data Systems (SDS) comprise an important class of data processing systems that support product generation from remote sensors and in-situ observations. These systems enable research into new science data products, replication of experiments and verification of results. NASA has been building systems for satellite data processing since the first Earth observing satellites launched and is continuing development of systems to support NASA science research and NOAA's Earth observing satellite operations. The basic data processing workflows and scenarios continue to be valid for remote sensor observations research as well as for the complex multi-instrument operational satellite data systems being built today.

  8. UAS remote sensing for precision agriculture: An independent assessment

    USDA-ARS?s Scientific Manuscript database

    Small Unmanned Aircraft Systems (sUAS) are recognized as potentially important remote-sensing platforms for precision agriculture. However, research is required to determine which sensors and data processing methods are required to use sUAS in an efficient and cost-effective manner. Oregon State U...

  9. Environmental and Landscape Remote Sensing Using Free and Open Source Image Processing Tools

    EPA Science Inventory

    As global climate change and human activities impact the environment, there is a growing need for scientific tools to monitor and measure environmental conditions that support human and ecological health. Remotely sensed imagery from satellite and airborne platforms provides a g...

  10. Use of Satellite Remote Sensing to Improve Coastal Hypoxia Prediction

    EPA Science Inventory

    We describe the use of Giovanni satellite remote sensing products in the development and testing of a new modeling system that represents the processes leading to hypoxia (defined as water O2 concentration < 63 mmol m-3) on the Louisiana continental shelf (LCS). The modeling ...

  11. WEST ELEVATION OF REMOTE ANALYTICAL FACILITY (CPP627) AND HOT PILOT ...

    Library of Congress Historic Buildings Survey, Historic Engineering Record, Historic Landscapes Survey

    WEST ELEVATION OF REMOTE ANALYTICAL FACILITY (CPP-627) AND HOT PILOT PLANT (CPP-640) LOOKING NORTHEAST. INL PHOTO NUMBER HD-22-2-1. Mike Crane, Photographer, 11/1998 - Idaho National Engineering Laboratory, Idaho Chemical Processing Plant, Fuel Reprocessing Complex, Scoville, Butte County, ID

  12. Remote Teacher Observation at the University of Kentucky

    ERIC Educational Resources Information Center

    Hager, Karen D.; Baird, Constance M.; Spriggs, Amy D.

    2012-01-01

    Faculty and staff from three university departments (Special Education, Distance Learning Programs, and Distance Learning Networks) collaborated to develop a system for remote observation of student teachers. Colleges across the campus currently use the system. The development process from inception to implementation is described, and the specific…

  13. Real-space measurement of potential distribution in PECVD ONO electrets by Kelvin probe force microscopy.

    PubMed

    Emmerich, F; Thielemann, C

    2016-05-20

    Multilayers of silicon oxide/silicon nitride/silicon oxide (ONO) are known for their good electret properties due to deep energy traps near the material interfaces, facilitating charge storage. However, measurement of the space charge distribution in such multilayers is a challenge for conventional methods if layer thickness dimensions shrink below 1 μm. In this paper, we propose an atomic force microscope based method to determine charge distributions in ONO layers with spatial resolution below 100 nm. By applying Kelvin probe force microscopy (KPFM) on freshly cleaved, corona-charged multilayers, the surface potential is measured directly along the z-axis and across the interfaces. This new method gives insights into charge distribution and charge movement in inorganic electrets with a high spatial resolution.

  14. Using KrF ELA to Improve Gate-Stacked LaAlO₃/ZrO₂ Indium Gallium Zinc Oxide Thin-Film Transistors with Novel Atmospheric Pressure Plasma-Enhanced Chemical Vapor Deposition Technique.

    PubMed

    Wu, Chien-Hung; Chang, Kow-Ming; Chen, Yi-Ming; Huang, Bo-Wen; Zhang, Yu-Xin; Wang, Shui-Jinn

    2018-03-01

    Atmospheric pressure plasma-enhanced chemical vapor deposition (AP-PECVD) technique and KrF excimer laser annealing (ELA) were employed for the fabrication of indium gallium zinc oxide thin-film transistors (IGZO-TFTs). Device with a 150 mJ/cm2 laser annealing densities demonstrated excellent electrical characteristics with improved on/off current ratio of 4.7×107, high channel mobility of 10 cm2/V-s, and low subthreshold swing of 0.15 V/dec. The improvements are attributed to the adjustment of oxygen vacancies in the IGZO channel to an appropriate range of around 28.3% and the reduction of traps at the high-k/IGZO interface.

  15. Impacts of Thermal Atomic Layer-Deposited AlN Passivation Layer on GaN-on-Si High Electron Mobility Transistors.

    PubMed

    Zhao, Sheng-Xun; Liu, Xiao-Yong; Zhang, Lin-Qing; Huang, Hong-Fan; Shi, Jin-Shan; Wang, Peng-Fei

    2016-12-01

    Thermal atomic layer deposition (ALD)-grown AlN passivation layer is applied on AlGaN/GaN-on-Si HEMT, and the impacts on drive current and leakage current are investigated. The thermal ALD-grown 30-nm amorphous AlN results in a suppressed off-state leakage; however, its drive current is unchanged. It was also observed by nano-beam diffraction method that thermal ALD-amorphous AlN layer barely enhanced the polarization. On the other hand, the plasma-enhanced chemical vapor deposition (PECVD)-deposited SiN layer enhanced the polarization and resulted in an improved drive current. The capacitance-voltage (C-V) measurement also indicates that thermal ALD passivation results in a better interface quality compared with the SiN passivation.

  16. [A review on polarization information in the remote sensing detection].

    PubMed

    Gong, Jie-Qiong; Zhan, Hai-Gang; Liu, Da-Zhao

    2010-04-01

    Polarization is one of the inherent characteristics. Because the surface of the target structure, internal structure, and the angle of incident light are different, the earth's surface and any target in atmosphere under optical interaction process will have their own characteristic nature of polarization. Polarimetric characteristics of radiation energy from the targets are used in polarization remote sensing detection as detective information. Polarization remote sensing detection can get the seven-dimensional information of targets in complicated backgrounds, detect well-resolved outline of targets and low-reflectance region of objectives, and resolve the problems of atmospheric detection and identification camouflage detection which the traditional remote sensing detection can not solve, having good foreground in applications. This paper introduces the development of polarization information in the remote sensing detection from the following four aspects. The rationale of polarization remote sensing detection is the base of polarization remote sensing detection, so it is firstly introduced. Secondly, the present researches on equipments that are used in polarization remote sensing detection are particularly and completely expatiated. Thirdly, the present exploration of theoretical simulation of polarization remote sensing detection is well detailed. Finally, the authors present the applications research home and abroad of the polarization remote sensing detection technique in the fields of remote sensing, atmospheric sounding, sea surface and underwater detection, biology and medical diagnosis, astronomical observation and military, summing up the current problems in polarization remote sensing detection. The development trend of polarization remote sensing detection technology in the future is pointed out in order to provide a reference for similar studies.

  17. Single and multijunction silicon based thin film solar cells on a flexible substrate with absorber layers made by hot-wire CVD

    NASA Astrophysics Data System (ADS)

    Li, Hongbo

    2007-09-01

    With the worldwide growing concern about reliable energy supply and the environmental problems of fossil and nuclear energy production, the need for clean and sustainable energy sources is evident. Solar energy conversion, such as in photovoltaic systems, can play a major role in the urgently needed energy transition in electricity production. Solar cells based on thin film silicon and its alloys are a promising candidate that is capable of fulfilling the fast increasing demand of a reliable solar cell supply. The conventional method to deposit silicon thin films is based on plasma enhanced chemical vapour deposition (PECVD) techniques, which have the disadvantage of increasing film inhomogeneity at a high deposition rate when scaling up for the industrial production. In this thesis, we study the possibility of making high efficiency single and multijunction thin film silicon solar cells with the so-called hot-wire CVD technique, in which no strong electromagnetic field is involved in the deposition. Therefore, the up-scaling for industrial production is straightforward. We report and discuss our findings on the correlation of substrate surface rms roughness and the main output parameter of a solar cell, the open circuit voltage Voc of c-Si:H n i p cells. By considering all the possible reasons that could influence the Voc of such cells, we conclude that the near linear correlation of Voc and substrate surface rms roughness is the result the two most probable reasons: the unintentional doping through the cracks originated near the valleys of the substrate surface due to the in-diffusion of impurities, and the high density electrical defects formed by the collision of columnar silicon structures. Both of them relate to the morphology of substrate surface. Therefore, to have the best cell performance on a rough substrate surface, a good control on the substrate surface morphology is necessary. Another issue influencing the performance of c-Si:H solar cells is the change in layer crystallinity during the growth of the c-Si:H i-layer. For PECVD deposited cells, it is often found that the layer crystallinity is enhanced with increasing film thickness. We found for Hot-wire deposited cells, however, the opposite development in material structure: the material becomes amorphous near the end of the deposition. This results in a deterioration of cell performance. We therefore introduce a so-called H2 reverse profiling technique, in which H2 is increased during the c-Si:H i-layer deposition. With this technique, a cell with an efficiency of 8.5% has been reached, which is in line with the best reported PECVD cells deposited on the same type of substrate. In the literature, carrier transport in c-Si:H cells has been a topic for debate. In this thesis, we present our finding of photogating effect on the spectral response of c-Si:H solar cells. When measured under coloured bias light, the apparent quantum efficiency value of a c-Si:H cell can be largely enhanced. This phenomenon is a typical result of trapping induced field modification in the bulk of a drift type solar cell. The discovery of this phenomenon has experimentally proved that field-driven transport to a large extend exist in a c-Si:H solar cell.

  18. Encryption for Remote Control via Internet or Intranet

    NASA Technical Reports Server (NTRS)

    Lineberger, Lewis

    2005-01-01

    A data-communication protocol has been devised to enable secure, reliable remote control of processes and equipment via a collision-based network, while using minimal bandwidth and computation. The network could be the Internet or an intranet. Control is made secure by use of both a password and a dynamic key, which is sent transparently to a remote user by the controlled computer (that is, the computer, located at the site of the equipment or process to be controlled, that exerts direct control over the process). The protocol functions in the presence of network latency, overcomes errors caused by missed dynamic keys, and defeats attempts by unauthorized remote users to gain control. The protocol is not suitable for real-time control, but is well suited for applications in which control latencies up to about 0.5 second are acceptable. The encryption scheme involves the use of both a dynamic and a private key, without any additional overhead that would degrade performance. The dynamic key is embedded in the equipment- or process-monitor data packets sent out by the controlled computer: in other words, the dynamic key is a subset of the data in each such data packet. The controlled computer maintains a history of the last 3 to 5 data packets for use in decrypting incoming control commands. In addition, the controlled computer records a private key (password) that is given to the remote computer. The encrypted incoming command is permuted by both the dynamic and private key. A person who records the command data in a given packet for hostile purposes cannot use that packet after the public key expires (typically within 3 seconds). Even a person in possession of an unauthorized copy of the command/remote-display software cannot use that software in the absence of the password. The use of a dynamic key embedded in the outgoing data makes the central-processing unit overhead very small. The use of a National Instruments DataSocket(TradeMark) (or equivalent) protocol or the User Datagram Protocol makes it possible to obtain reasonably short response times: Typical response times in event-driven control, using packets sized .300 bytes, are <0.2 second for commands issued from locations anywhere on Earth. The protocol requires that control commands represent absolute values of controlled parameters (e.g., a specified temperature), as distinguished from changes in values of controlled parameters (e.g., a specified increment of temperature). Each command is issued three or more times to ensure delivery in crowded networks. The use of absolute-value commands prevents additional (redundant) commands from causing trouble. Because a remote controlling computer receives "talkback" in the form of data packets from the controlled computer, typically within a time interval < or =1 s, the controlling computer can re-issue a command if network failure has occurred. The controlled computer, the process or equipment that it controls, and any human operator(s) at the site of the controlled equipment or process should be equipped with safety measures to prevent damage to equipment or injury to humans. These features could be a combination of software, external hardware, and intervention by the human operator(s). The protocol is not fail-safe, but by adopting these safety measures as part of the protocol, one makes the protocol a robust means of controlling remote processes and equipment by use of typical office computers via intranets and/or the Internet.

  19. Simple realization of efficient barrier performance of a single layer silicon nitride film via plasma chemistry.

    PubMed

    Lee, Jun Suk; Sahu, Bibhuti Bhusan; Han, Jeon Geon

    2016-11-30

    Due to the problem of degradation by moisture or oxygen, there is growing interest in efficient gas diffusion barriers for organic optoelectronic devices. Additionally, for the continuous and long-term operation of a device, dedicated flexible thin film encapsulation is required, which is the foremost challenge. Many efforts are being undertaken in the plasma assisted deposition process control for the optimization of film properties. Control of the plasma density along with the energy of the principal plasma species is critical to inducing alteration of the plasma reactivity, chemistry, and film properties. Here, we have used the radio frequency (RF) plasma enhanced chemical vapor deposition (PECVD) technique to deposit amorphous silicon nitride (SiN x ) barrier films onto a plastic substrate at different pressures. A large part of our efforts is devoted to a detailed study of the process parameters controlling the plasma treatment. Numerous plasma diagnostic techniques combined with various characterization tools are purposefully used to characterize and investigate the plasma environment and the associated film properties. This contribution also reports a study of the correlations between the plasma chemistry and the chemical, mechanical, barrier, and optical properties of the deposited films. The data reveal that the film possesses a very low stress for the condition where the net energy imparted on the substrate is at a minimum. Simultaneously, a relatively high ion flux and high energy of the ions impinging on the film growth surfaces are crucial for controlling the film stress and the resulting barrier properties.

  20. Radar Remote Sensing of Ice and Sea State and Air-Sea Interaction in the Marginal Ice Zone

    DTIC Science & Technology

    2014-09-30

    1 DISTRIBUTION STATEMENT A. Approved for public release; distribution is unlimited. Radar Remote Sensing of Ice and Sea State and Air-Sea...Interaction in the Marginal Ice Zone Hans C. Graber RSMAS – Department of Ocean Sciences Center for Southeastern Tropical Advanced Remote Sensing...scattering and attenuation process of ocean waves interacting with ice . A nautical X-band radar on a vessel dedicated to science would be used to follow the

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